Manufacturing in Cleanrooms at PI (Physik Instrumente)-- Dr. Peter Schittenhelm --Manufacturing in Cleanrooms at PI (Physik Instrumente)
Capabilities and Capacity

Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, www.pi.ws

Page 1 of 4

Manufacturing in Cleanrooms at PI (Physik Instrumente)-- Dr. Peter Schittenhelm --1 Introduction
2 Available Cleanrooms /Ultraclean Workplaces

PI has the capability to manufacture and qualify products
under cleanroom conditions at a number of production sites.
This capability is extended and improved continually according to market needs.

1.1

In addition to cleanrooms, PI also has ultraclean workplaces,
which are installed either inside or outside of the cleanrooms,
and their purpose, when compared to the respective environment, is to achieve a further reduction of particle contamination during certain process steps.

Standards

Since 2001, classification of cleanrooms no longer takes place
according to US FED STD 209E but instead, according to ISO
14644-1. Some of the cleanroom classifications are listed
according to both standards in the following tables.

Particle per m
Class0.1 µm

2.130.2 µm

0.3 µm

0.5 µm

1.0 µm

5.0 µmISO 5

100,000

23,700

10,200

3,520

832

ISO 6

1,000,000

237,000

102,000

35,200

8,320

293

ISO 7

352,000

83,200

2,930

ISO 8

3,520,000

832,000

29,300Tab. 1

Clean room classification according to ISO14644-1

Particle per m

PI Karlsruhe

PI Karlsruhe is the largest production and development site in
the PI Group. Standard and custom products, mainly in thefield of piezo-based positioning systems, hexapods, and magnetic drives are assembled and qualified here. All areas formass production, including incoming goods inspection, areISO class 8 cleanrooms. In addition, PI Karlsruhe has a newly
created ISO class 5 cleanroom that also considers all standards applied to EUV applications. The Special Products Fractal,
in addition, has rooms classified according to ISO class 7 aswell as ISO class 5 ultraclean workplaces. An ISO class 7 laboratory is available in the Development department.

Cleanroom classification

3Class0.2 µm

0.3 µm

0.5 µm10026,48610,594

3,531

5.0 µmAvailable space in m

2ISO 5250

ISO 6-1,000

35,315247

ISO 7600

10,000353,147

2,472

ISO 8

3,000

100,000

3,531,470

24,720Tab. 2

Tab. 3Cleanrooms at PI KA

Abb. 1

Manufacturing space in ISO class 5 cleanroom at PI Karlsruhe

Cleanroom classification according to US FED STD 209E

Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, www.pi.ws

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Manufacturing in Cleanrooms at PI (Physik Instrumente)-- Dr. Peter Schittenhelm --2.3

PI miCos, Eschbach

All assembly areas at PI miCos, including incoming goods
inspection, are ISO class 8 cleanrooms. Some of these cleanrooms contain ultraclean workplaces with ISO class 5. The
Engineered Systems division also has an ISO class 7 cleanroom.

Cleanroom classification

Abb. 2

2.2

Measuring technology space in ISO class 5 cleanroom at PI
Karlsruhe

Available space in m2ISO 5

10ISO 6-ISO 760ISO 8650

Tab. 5Cleanrooms at PI miCos

Abb. 4Multi-axis positioning system for X-ray spectroscopy, manufactured in an ISO class 7 cleanroom at PI miCos in Eschbach, Germany

2.4

PI USA, Hopkinton

PI Ceramic, Lederhose

The entire process chain for multilayer production, beginningwith tape casting, is realized at PI Ceramic in cleanrooms
according to ISO class 6, 7, and 8; the assembly processes forpiezo actuators and sensors of the Building Components
product division also take place consistently in ISO class 7 or 8cleanrooms. Depending on the process requirements, ISOclass 7 to 9 cleanrooms are available for further selectedprocesses such as sputtering, screen printing, and dispensing.

Cleanroom classification

Available space in m2ISO 6310

ISO 7720

ISO 8620

ISO 9340

Tab. 4

Cleanrooms at PI Ceramic, incl. building extension (completion inQ3/2020)

PI USA has an ISO class 8 assembly island in the production
area, which includes measuring capabilities, cleaning, andpackaging under cleanroom conditions.

Cleanroom classification

2ISO 5-

ISO 6-

ISO 7-

ISO 820Tab. 6Abb. 3

Available space in m

Cleanrooms at PI USA

Workplace for manufacturing PICMA® multilayer actuators in an
ISO class 6 cleanroom at PI Ceramic

Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, www.pi.ws

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Manufacturing in Cleanrooms at PI (Physik Instrumente)-- Dr. Peter Schittenhelm --Depending on the processes at the respective locations, PI or
its partners have the ability to clean parts and products ateach location according to the cleanroom classifications andthen check the cleaning results for particle contamination andif necessary, for other types of contamination as well.
Calibrated particle measuring devices allow PI to monitor thecleanroom quality according the specifications of ISO 146441. PI also has the ability to measure the quantity of particles
that originate from its own products under operational conditions.

To get an insight into the new cleanroom at PI Karlsruhe,
please click on the thumbnail:PI in Brief
For many years, PI (Physik Instrumente), founded in 1970, hasbeen a market and technology leader for high-precision positioning technology and piezo applications in the semiconductor industry, life sciences; photonics, and in industrial automation. In close cooperation with customers from all over theworld and for 50 years now, PI's specialists (approx. 1,300)
have been pushing, again and again, the boundaries of what
is technically possible and developing customized solutions
from scratch. Technologies from PI achieve reproducible
accuracies in the millionth of a millimeter range. More than
350 granted and registered patents underline the company'sclaim to innovation.
PI develops, manufactures, and qualifies all core technologies
in-house, thereby constantly setting new standards for precision positioning: Piezoceramic patch transducers and actuators, electromagnetic drives, and sensors working in thenanometer range. As the majority owner of ACS Motion Control, PI is also a leading global manufacturer of modular motion control systems for multi-axis drive systems and develops
customized complete systems for industrial applications withthe highest precision and dynamics.
With six manufacturing sites and 15 sales and service offices
in Europe, North America, and Asia, PI is represented wherever high-tech solutions are developed and manufactured.

Physik Instrumente (PI) GmbH & Co. KG, Auf der Roemerstrasse 1, 76228 Karlsruhe, Germany
Phone +49 721 4846-0, Fax +49 721 4846-1019, Email info@pi.ws, www.pi.ws

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WP4008 Manufacturing in a Cleanroom at PI R1 05/2020. Subject to change. © Physik Instrumente (PI) GmbH & Co. KG 2020

3 Supporting Processes