Parallel Kinematics Optimizes Motionin Multiple Axes

In a parallel-kinematic multi-axis system, allactuators act directly on one moving platform.
This means that all axes move the same minimized mass and can be designed with identical dynamic properties. Parallel-kinematicsystems have additional advantages overserially stacked or nested systems, including
more-compact construction and no cumulative
error or weight from the different axes. Parallel-kinematic systems can be operated with up
to six degrees of freedom with low inertia andexcellent dynamic performance.

In a parallel-kinematic structure, all drives act on thesame moving platform so that the individual axes havethe same dynamic behavior. Consequently, higherdynamics and higher scanning frequencies, improved
guiding accuracy, repeatability and stability can beachieved than with serial axes systems

A serial multi-axis system, whether nested or stacked,
assigns exactly one direction of motion to each actuatorand each sensor. The stage axes carry the next mounted
axis so that the dynamic properties deteriorate andthe overall stiffness decreases. Moreover, the runoutsof the individual axes add up to a lower accuracy andrepeatability. Serial-kinematic systems have a simpler
structure and can often be manufactured at lower costs

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TEC65 Parallel Kinematics Optimizes Motion in Multiple Axes 10/2017 Subject to change without notice. © Physik Instrumente (PI) GmbH & Co. KG 2017

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