MOTION|POSITIONING

Industrial Applications

LMP - Laser Micromachining

Headquarters

ACS Motion Control

PI Subsidiaries

LMP – Laser Ablation

GERMANYISRAELUSA (East) & CANADA

USA (West) & MEXICOThe laser ablation of the surface of engineering ceramics, such as
silicon or sapphire, requires a narrow depth of focus to ensurea small focus point that leads to an accurate control of material
removal and limits damage. The laser spot defines the fluence, i.e.,
the energy delivered per unit area, (the energy delivered per unitarea) and its regulation is needed to control the ablation threshold.
When material is removed, the distance between the surface being
processed and the current focal point change. With the V-308, it ispossible to control exactly how deep in the material the process
takes place by adjusting the focal point. In addition, the processing
efficiency and the quality of the sidewalls within the features canbe optimized.

Physik Instrumente (PI)GmbH & Co. KG
Auf der Roemerstrasse 176228 Karlsruhe
Phone +49 721 4846-0
Fax+49 721 4846-1019
info@pi.ws
www.pi.ws

ACS Motion Control Ltd.
Ramat Gabriel Industrial Park
1 Hataasia St.
Migdal HaEmek, 2307037
POB 984
Phone +972-4-6546440
Fax+972-4-6546443
info@acsmotioncontrol.com
www.acsmotioncontrol.com

PI (Physik Instrumente) L.P.
Auburn, MA 01501
www.pi-usa.us

PI (Physik Instrumente) L.P.
Irvine, CA 92620
www.pi-usa.us

Wafer Inspection
As semiconductor devices move towards a higher integration anddensity with the advances in semiconductor materials and processes, the critical defect size decreases. There are two factorsthat affect the topology of the wafer surface: The surface tension
induced by IC manufacturing and the surface roughness. To quickly
obtain a high-quality surface image, defect inspection tools must
operate at high resolutions and high inspection speeds. A preciseand fast and fast autofocus ability is critical. The V-308 allows afast and precise compensation to maintain depth of focus. It has
the added advantage of an extended travel range, eliminating theneed for an additional coarse moving stage.

PI miCos GmbH
Freiburger Strasse 3079427 Eschbach
Phone +49 7634 5057-0
Fax+49 7634 5057-99
info@pimicos.com
www.pi.ws
PI Ceramic GmbH
Lindenstrasse
07589 Lederhose
Phone +49 36604 882-0
Fax+49 36604 882-4109
info@piceramic.com
www.piceramic.com

USA (San Francisco Bay Area)

UK & IRELAND

PI (Physik Instrumente) L.P.
Sausalito, CA 94965
www.pi-usa.us

PI (Physik Instrumente) Ltd.
Cranfield, Bedford
www.physikinstrumente.co.uk

ITALY

NETHERLANDS

Physik Instrumente (PI) S. r. l.
Bressowww.pionline.it

PI Benelux B.V.
Sint-Oedenrode
www.pi.ws/benelux

FRANCESPAINPI France SAS
Aix-en-Provence
www.pi.wsMicos Iberia S.L.
Vilanova i la Geltrú
www.pimicos.es

JAPANPI Japan Co., Ltd.
Tokyo
www.pi-japan.jp
CHINA© Physik Instrumente (PI) GmbH & Co. KG
All contents, including texts, graphics, data etc., as well as their layout,
are subject to copyright and other protective laws. Any copying, modification or redistribution in whole or in parts is subject to a written
permission of PI.
Although the information in this document has been compiled withthe greatest care, errors cannot be ruled out completely. Therefore,
we cannot guarantee for the information being complete, correct andup to date. Illustrations may differ from the original and are notbinding. PI reserves the right to supplement or change the information
provided without prior notice.

Physik Instrumente(PI Shanghai) Co., Ltd.
Shanghaiwww.pi-china.cn

Physik Instrumente(PI Shanghai) Co., Ltd.
Beijing
www.pi-china.cn

SOUTHEAST ASIA

TAIWAN

PI (Physik Instrumente)
Singapore LLP
Singaporewww.pi-singapore.sg
For ID / MY / PH / SG / TH / VNM

Physik Instrumente (PI)Taiwan Ltd.
Taipeiwww.pi-taiwan.com.tw

KOREA

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W W W. P I . W SPI Japan Co., Ltd.
Osaka
www.pi-japan.jp

PI Korea Ltd.
Seoul
www.pikorea.co.kr

W W W. P I . W S

BRO76E V-308 Voice Coil PIFOC 03/2021 0.0. Subject to change without notice. © Physik Instrumente (PI) GmbH & Co. KG 2021

Many laser micromachining processes used, for example, in theproduction of photovoltaic cells, electronic devices, and medical
microelements require a small focal point to achieve high intensity and produce fine features. The V-308 enables high quality laser
micromachining by providing nanometer precision control of thefocal height. Even with irregular workpiece surfaces the V-308
allows fast compensation of the focusing optics according to therequired focus height to avoid loss of quality. The compensation
can be achieved by precharacterization or by using a high-speed
autofocus sensor. This allows high volume production in processes
where a narrow depth of focus is required.

V-308 Voice Coil PIFOCHIGH DYNAMICS OBJECTIVE FOCUS DRIVEW I T H W E I G H T F O R C E C O M P E N S AT I O N

W W W. P I . W S

Microscopy Applications

Introducing the V-308 Voice Coil PIFOC

Key Benefits

Highly Versatile Z Axis Positioner

High Productivity, Fast, and Reliable Results

EXTENSIVEACCESSORIESHigh productivity due to short data acquisition times/
quick scanning

From genome sequencing through multiphoton fluorescence microscopy, deep tissue inspection, lasermaterials processing, and wafer inspection to magnetic
tweezers in research … vertical positioning systems withlarge travel range, high dynamics, and precision arerequired in numerous applications in microscopy andindustry. With the new V-308 voice coil PIFOC, PI nowoffers a magnetic direct drive based solution that unites
all these requirements.

2 or 3-Photon Fluorescence Microscopyn	In two or three photon fluorescence microscopy, two photons (sometimeseven three) excite visible fluorescence in deep tissue layers in the infraredrange. By using infrared emissions, a deeper penetration is achieved;
this is why a respectively large travel range is required. For example, cellorgans, metabolic processes, etc. were examined.

Reliable performance based on precise motion andpositioningn	High sample/workpiece safety in case of power failureby user-adjustable weight force compensationn	

Adapter rings forobjective mounting

Highly flexible usagen	The stage can be operated with the specially developed C-414 controller (see image) using the proven
PIMicroMove user interface. Alternatively, the stage
can also be operated with several ACS controllers,
namely the SPiiPlus controller supplemented by theNPMpm driver/amplifier for even higher dynamics.

nEasy integrationn

Short delivery times
Support by engineering and application expertsn	

Deep Tissue Multiphoton Fluorescence Microscopy

Adapter plate for mounting on an optical benchor plate

Long warranties as a standardn	The deep tissue multiphoton fluorescence microscopy is a subtype of the2-photon fluorescence microscopy. Here, Z stacks with a thickness of 6 mm
are created – correspondingly large is the travel range required for the Zpositioner. This type of microscopy can, for example, be applied in theexploration of the connectome, the interconnection of neurons in the brain.
Typically, inverse, confocal microscopes are used with special objectives
that have a mass of up to 800 g.

Holders for vertical orhorizontal objectivemounting

Key Features

Genome Sequencing
An essential method for genome analysis is the so-called 'squencing-bysynthesis' method. With this method, nucleotide with fluorescent markers
are gradually incorporated into a single strand DNA and are so 'synthesized'. If it comes to a recombination of the base pair, a characteristic
fluorescent color signal ('occurrence') is generated for each of the four
different base pair combinations. These signals are detected microscopically. Since the signals are weak and also very short lived, the detection
and imaging process must be very fast. For this purpose, the objective
must be precisely aligned at the height of the occurrence along the opticalaxis, within the depth of field of the lens. Here, the required travel ranges
are up to 5 mm.

Extraordinary Performance for Your Applications

High dynamics

Flexible usage and mounting

Accelaration: 8m/s²n	Adapter rings for simple exchange of objective

Max. speed: 200 mm/sn	Step-and-settle: <15 ms @100 nm and 250 nm;±15 nmn	n	 ser-adjustable weight force
Ucompensation: to 1 kg ser-adjustable travel range/stops
Ufrom 1 mm to 7 mm

Adapter plate for mounting the drive to an
optical platen	n	Objective holder for horizontal or verticalassembly

Precision in motion
Compact design / proven precision components

Min. Step size: 10 nmn	

Digital Slide Scanning

Compact outer dimensions: 87 x 77 x 30 mm(H/W/D)

Bidirectional repeatability:
25 nm (on 100 nm travel)n	Position noise: 3 nmn	n	This application is about creating and achieving digital sample images by
widely automating the scanning of tissue samples, mainly from routine
examinations. These images can then be can be analyzed from experts
around the world and samples do not have to be placed repeatedly underthe microscope. For example, this is important for following up medicaltreatments.

Crossed roller bearings with anti-creep systemn	

Reliable voice coil motorn	Proven PIOne linear encodern	4>> For a complete overview of specifications please click here to visit the product webpage

W W W. P I . W S5MOTION|POSITIONING

The required travel ranges of one to two millimeters are not as large
as in other applications; however, high dynamics when focusing is very
important.

M O T I OW
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