SUBNANOMETERVACUUM

CONSTANTVELOCITYREPEATABILITYCUSTOM DESIGNSRELIABLE

PILINE®

Q-MOTION®

COST EFFECTIVEPIEZOWALKPRECISIONPIEZOMIKESPARALLEL KINEMATICS

MOTION CONTROLCOMPACTPRECISION AND DYNAMICS
WITH PIEZO MOTOR STAGESHIGH DYNAMICS
MULTI-AXIS SOLUTIONSW W W. P I . W S®

Precision and Dynamics with Piezo Motor Stages

Product Finder Online – What is the easiest way for you to find the best positioning solution?
The printed catalog is a major showcase for PI and, as well as presenting the entire productrange, it also acts as a reference for all of our motion solutions. However, to take advantageof the latest products and developments, we recommend using the product finder on the PI
website www.pi.ws.
How to use the product finder:
Select the product type specified by the axes of motion required. Selection of more criteria
expands or shortens the list of results. Select more than one filter at a time, for example, tofind positioning stages designed for higher load capacity, too.

INTRODUCTION
		
		
		
		
		
		
		
		
		
		
		
		
		

Markets and Applications ............................................................................................. 	 4Custom Examples Picture Wall .................................................................................... 	 8Options of Customizations / OEM Capabilities ............................................................. 	11Facts on Piezomotors ................................................................................................... 	 12
The PI Group – A Strong Partner for Industry and Research ........................................ 	 15
The PI Group Milestones .............................................................................................. 	 16
Expert Consulting ......................................................................................................... 	 18
Engineering Design Expertise and Customization ........................................................ 	 19
Production Capabilities ................................................................................................ 	 20
Vacuum Know-how ...................................................................................................... 	 21
From 1-off to Series: OEM Users Benefit From Maximum Flexibility ........................... 	 22
Global Service and After-Sales ..................................................................................... 	 23

2

W W W. P I . W SIntroduction
Linear Stages

PRODUCTS

XY Stages andMicroscopy Solutions

		Linear Stages ....................................................................................................................................................................... 	 24
PILine® Stages for High Dynamics ................................................................................ 	 26
Q-Motion® Stages, UHV-Compatible and Most Compact ............................................. 	 30
NEXACT® PiezoWalk® Linear Stages for Higher Load Capacity .................................... 	 46

Rotation Stages

XY Stages and Microscopy Solutions .................................................................................................................................. 	 50
		High-Efficiency PILine® XY Stages ................................................................................ 	 52		
Microscopy Solutions ................................................................................................... 	 56
		Rotation Stages ................................................................................................................................................................... 	 62
		PILine® Rotation Stages with High Dynamical Bandwidth ............................................ 	 64
		Q-Motion® Stages, UHV-Compatible and Most Compact ............................................. 	 70

Parallel Kinematics /Hexapods

Parallel Kinematics / Hexapods ........................................................................................................................................... 	 76
		Parallel-Kinematic Q-Motion® Designs, UHV and Cleanroom Compatible .................... 	 78
		NEXACT® PiezoWalk® Hexapod for Higher Load Capacity ............................................ 	 82

PiezoMike Actuators

		Linear Actuators ................................................................................................................................................................... 	 84
		
PiezoMike Actuators ..................................................................................................... 	 86
		
PiezoMike Mirror Mount ............................................................................................... 	 96
		Linear OEM Actuators .................................................................................................. 	 98

Motion Control

Motion Control ..................................................................................................................................................................... 	102
		
PILine® Motion Controllers ........................................................................................... 	104
		Q-Motion Controllers ................................................................................................... 	112
		Modular Multi-Channel Controllers .............................................................................. 	116
		Q-Motion Hexapod Controller ...................................................................................... 	122		
PiezoMike Controller .................................................................................................... 	124
		Drive Electronics .......................................................................................................... 	126
		Accessories .......................................................................................................................................................................... 	130
		
Adapter Plates and Brackets for Multi-Axis Combinations ........................................... 	132
		Vacuum Feedthroughs ................................................................................................. 	142
		
Adapter and Extension Cables ..................................................................................... 	147

		
Product Index ....................................................................................................................................................................... 	154

More information, step-files and downloads are available from our website www.pi.ws.
All data subject to change without notice, ©PI 2018.

3

MOTION|POSITIONING

Terms and Technology
Glossary

Accessories

Terms and Technology Glossary .......................................................................................................................................... 	148

Markets and Applications

Piezomotors position a laser
for use in an eye surgery
application fast and reliably

LIFESCIENCE AND MICROSCOPY
Optical methods have been relying on PI positioning
systems for years, e.g. for aligning optical systems
or samples. Piezo motors and actuators are best for
replacing conventional motor/spindle driven systems
because they are more compact, more precise andfaster. Other non-optical microscopic processes,
such as SEM (scanning electron microscope) andAFM (atomic force microscope), use PI systems dueto their high accuracy and dynamics.
The XY stage with PILine® technology ensures fast
probing scans in microscopy (Image: ©ZEISS)

4W W W. P I . W SIntroduction

AUTOMATION OF HANDHELD OR PORTABLE DEVICES
Leica Geosystems, a leading manufacturer of high-precision surveying instruments, relies on PILine ®
direct drive technology in their new total station product line. Total stations are used for angle anddistance measurement in geodesy. Customer requirements included an extensive increase of therotation speed and the angular resolution compared to the previously used conventional drive. The
typical usage of the device consists of rotating a mass of 6 kg (15,000 kg/m²) in alternating directions, witha total of 7,000 h or 2,500 km of operation.

Several thousands of PILine® piezomotors are
currently in the field where they are used forautomated measurement routines. Battery-driven
operation is essential here, which is made possible
with the very low energy requirement of PILine®
stages (Image: DMT, Essen, Germany).

5

MOTION|POSITIONING

Markets and Applications

SCIENTIFIC INSTRUMENTATION
From small-scale laboratory automation toexperimental endstations of beamlines insynchrotrons and other particle accelerators, a large variety of applications in thescientific environment benefits from piezo
based, sub-nanometer precision scanningand positioning. The conditions of use vary,and include ultrahigh vacuum, nonmagnetic
or cryogenic.

The miniature parallel-kinematic Q-845 aligns
the probe extremely flexibly in all 6 degrees of
freedom. The requirements are the lowest possible
weight and an angular accuracy of up to 0.001°
respectively, an error of less than 1 µm when
positioning the probe during the rotation process.
(Image: D. Hänschke, KIT Karlsruhe, Germany)

INDUSTRIAL SOLUTIONSThe six-axis parallel kinematics align a wafer with highprecision and stability relative to an optical measuringsystem. The PIFOC® objective positioner takes over thefocusing. The system is controlled via a common interface
on a customized controller.

6

W W W. P I . W SIntroduction

MICROMANIPULATION

Eight Q-Motion® axes position components precisely to each other in this system. The six-axis
hexapod aligns micrometer-sized components relative to the manipulator with an angularresolution under 10 µrad. Even the feeds from below and the side are moved by customized
Q-Motion® linear stages. (Image: VUB Vrije University Brussels, Belgium)

OPTOMECHANICSHigh throughput and high resolution are essential for optical particle analysis technology.
Particle of different sizes are detected in liquids of all kind, ranging from monitoring ofpipelines to ecological environments such as rivers or sea water. The application puts
strong demands on the moving components in the optical path. A customized Q-motion®
stage is fully integrated into the machine and positions the objective with high-precision
positioning with excellent time stability. (Image: Fluid Imaging Technologies)

7

MOTION|POSITIONING

Custom Examples Picture WallThis customized, nonmagnetic, and HV-compatible hexapod is only
130 mm in height and has a diameter of 140 mm. Modified PiezoMike
inertia drives serve as drives. With 5 mm/s, they are considerably fasterthan the classical PiezoMikes. A special joint construction ensures thenecessary stiffness and at the same time, a long travel range of up to
10 mm.

This customized tripod with PiezoMike inertia drives is used
for adjusting a mirror. The mirror can be moved along an
axis linearly and tilted in two further orthogonal axes. The
constructive challenge was to realize a relatively long travel
range of several millimeters in a compact installation spaceof 110 mm × Ø 50 mm.

It is possible to develop inexpensive customized products with PILine®
ultrasound motors that allow travel ranges up to 250 mm. The example
shows a linear axis for positioning a measuring head along a travel rangeof 150 mm. The principle of the holding force in a power off condition
allows virtually drift-free measuring at any position.

This miniature XYZ setup is based on the smallest Q-Motion®
Q-521 linear stages and is used in industrial environments
for microadjusting. To enable higher duty cycles, the guide issupported laterally. The vertical axis is equipped with a masscompensated spring preload to relieve forces.

8

W W W. P I . W SIntroduction

This miniature hexapod was developed on the basis of fast PILine® ultrasonic motors toenable fast motion in all six spatial directions (three linear, three rotational). The parallelkinematic SpaceFAB design makes a particularly low overall height of only 80 mm possible.
The individual axes can be commanded with up to 120 mm/s.

This three-axis system integrates two linear
axes and a rotational axis and is used for aligning and fast, surface area scanning of photosensitive sensors. The use of PILine® ultrasonicmotors makes shorter process times and asmall installation space possible.

PiezoWalk® piezo-based drives combine excellent long-term stability andrepeatability with a small form factor.
This positioner is used for precise
readjustment of monochromator
crystals in an X-ray spectrometer.

In addition to the fast PILine® ultrasonic motors
and high resolution sensor technology, this XY
stage also has a fully-fledged controller and cantherefore be operated directly with a USB joystick
without additional external electronics. It provides
an inexpensive solution for automating object
motion under benchtop microscopes.

9

MOTION|POSITIONING

Custom Examples Picture Wall

PILine® ultrasonic motors are suitable for directly driven rotary motion.
This special product has a clear aperture of Ø 53 mm for accommodating
2” lenses and is also made completely of nonmagnetic materials. Even
the rotation bearing is a proprietary development from PI. The low-profile design allows stacking of several rotational axes while maintaining
small distances between the lenses.

It is also important that the control unit for motion axes isdesigned according to customer specifications, in particular for
highly integrated solutions in mobile end devices. This example
shows the functionality of a C-867.1U controllers for PILine®
ultrasonic motors shrunk down to 50 × 50 mm² for easy insertion
into the main board in the application.

This extremely compact and highly integrated rotational axis with
PILine® ultrasonic motors has a clear aperture of Ø12.5 mm. It is acustomized development to rotate a measuring instrument in a batteryoperated, mobile medical device. The speed of up to 2 revolutions
per second make it possible to achieve shorter process times and theholding force principle in a power-off state also conserves the battery.

The miniaturized N-472 PiezoMike with inertia drive is usedin the semiconductor industry for remote adjustment of opticalcomponents in ultrahigh vacuum. The actuators have a travel
range of 8 mm and a resolution in the nanometer range, andare accommodated in a space of only 40 × 32 × 15 mm³.

10

W W W. P I . W SIntroduction

Options of Customizations / OEM Capabilities

PILine® ultrasonic motors can be designed in different sizes, to generate various forces, and for different axes of motion. This makes
it possible to develop custom-fit, customer-specific solutions that allow linear or rotary motion with velocities up to 400 mm/s,
forces to 20 N, and minimum incremental motion to 10 nm. PI has the entire manufacturing chain at its disposal for manufacturing
piezo actuators. The latest development is an ultrasonic piezo motor that can be operated with allow voltage of less than 12 volts andis particularly suitable for use in the medical sector, where high, dangerous contact voltages must be prevented for safety reasons.

A possible option for OEM customers: The motion controller for the piezo
motor drive of a mobile device is compressed onto a chip.

Miniature piezo ultrasonicdrive elements in different sizes,
to generate various forces,
and for different axes of motion.

11

MOTION|POSITIONING

Facts on Piezomotors

NANOPOSITIONING WITH PIEZOMOTORS OVER LONG TRAVEL RANGES
Piezomotors are optimally suited for using the specific properties of piezo actuators to achieve longer travel ranges. Adapted to
the required force and velocity development, PI provides a series of different piezomotor technologies, each of which focuses on
different features. For example, PI piezomotors that feature high stiffness and resolutions in the nanometer range are used fornanometer-precision stages with travel ranges over 1 mm.

General Properties of Piezomotor Drivesn	Self-locking when powered off with maximum holding forcen	Piezomotors do not generate magnetic fields nor are they affected by themn

Scalable travel rangesnNanometer-precision resolutionnEasy mechanical integrationn	Different technologies optimized for high velocities or for high forces

Overview of Drive Types for Miniature
Piezo Stages and Actuators

Q-Motion® Inertia Drives
Smallest piezomotor drive principle. Cost-effective
single-actuator, single-phase drive concept. Used forminiaturized positioners with nanometer resolution.

PiezoMike Actuators
Adapted piezo inertia drive used for linear
actuators. Ideal for set-and-forget applications.
High force, high stability, low velocity.

PiezoWalk® NEXACT®
Multi-actuator, multi-phase drive concept. High-precision
positioners with nm-resolution. Offer high force at low
velocities and are intended for low duty cycles.

PILine® Ultrasonic Motors
Fastest piezomotor drive principle to several 100 mm/s.
Cost-effective single-actuator, single-phase drive concept.
Multi-phase drive concept optional for nanometer precisionand best constant velocity. PILine® systems typically reach
2,000 h of operation, 2,000 km or 20 million cycles.

12

W W W. P I . W SIntroduction

WHY USE PIEZOMOTORS INSTEAD OF ELECTRO MOTORS?
Motor-leadscrew combinations transform the rotational motion of the motor into linear motion. Due to play in the mechanicalcomponents responsiveness is limited. Linear motors such as PILine® generate linear motion directly and provide much faster
response and better stability. Furthermore, they allow significantly smaller designs. All piezomotor drives, independent from thetechnology used, are self-locking when powered off. This is due to their design where the piezoactuator is preloaded orthogonallyto the direction of motion. Thus, piezomotors are ideal for precise and stable positioning even over a long standstill.

TRAVEL, FORCE, LIFETIME: BASIC SPECS OVERVIEW
Motion, Positioning
Travel range

Q-Motion®
Inertia Drives

PILine® Ultrasonic Motors

PiezoMike
ActuatorsPiezoWalk®
NEXACT®

<1 mm

•

•

•

•

1 to 100 mm••~25 mm•••>100 mmFeed force≤10 N~200 mm••~25 N
Velocity•≤1 mm/s•• •*~10 mm/s••>100 mm/s
Lifetime

•
•

••

≤1 km
~100 km

•

•

•

•

>1000 km••

Small dimensions

••

•

•

•

Self-locking at rest

•

•

••

•

Ultra-high vacuum• •**Non-magnetic

•

•
•

•

* Highly constant velocity al low velocity.
** Q-Motion® stages are available as UHV-compatible versions.

13

MOTION|POSITIONING

Facts on Piezomotors

APPLICATION OVERVIEW
Applications

Major
requirements

Q-Motion®
Inertia Drives

PILine® Ultrasonic Motors

Mobile devices

Battery drivenxx

Self-locking at restx

Small dimensions

x

Semiconductor
manufacturing
and inspection

OEM capabilities

x

x

x

x

x

x

x

x
High-class clean roomx

Ultra-high vacuumx

Fast settling

x

x

x

Long-range motion

x

x

x

High resolution

x

x

x

Constant, low velocity

x

x

x

Scanning mode withhigh velocities
Electronmicroscopy /Beamline
instrumentation

PiezoWalk®
NEXACT®

High-force position

stability

Opticalsuperresolution
microscopy

PiezoMike
Actuatorsxxx

Ultra-high vacuumxx

Non-magneticx

Small dimensionsxx

Low pricexxx

In-house engineering

x

x

x

x

High-volume
manufacturing

x

x

x

x

x

14

W W W. P I . W S

xIntroduction

The PI Group – A Strong Partner
for Industry and Research

The PI headquarters in Karlsruhe, Germany, manifests the continuous growth. In front, the 2017 Technology Center

Over the last four decades, PI (Physik Instrumente) has developed into the leading manufacturer of nanopositioning technology. The key element and motivation of the entrepreneurial
behavior have always remained the same: Finding the best possible solution for the customer.
PI is well known for the quality of its products and has been one of the leading players in the
global market for precision positioning technology for many years. One of the most importantbuilding blocks for this is the team spirit within the international PI family, which is based on
mutual understanding and support that goes beyond international borders and functional
restrictions.
PI is a privately owned company with healthy growth, more than 1000 employees worldwide
and a flexible, vertically integrated organization, which enables PI to fulfill almost any request
in the field of innovative precision positioning technology. The foremost priority for PI is tobe a reliable and highly qualified partner for the customer.

15

MOTION|POSITIONING

The PI Group Milestones
A Success Story

Well known for the high quality of its products, PI (Physik Instrumente) has been
one of the leading players in the global
market for precision positioning technology for many years. PI has been developing and manufacturing standard and OEM

products with piezo or motor drives formore than 40 years. In addition to four
locations in Germany, the PI Group isrepresented internationally by fifteen
sales and service subsidiaries. All of ourcustomers worldwide can rely on this.

Market introductionof PILine® ultrasonicpiezomotors

Foundation of PI Ceramicin Thuringia, Germany,
cornerstone for market
leadership in nanopositioning technology
Founding year
of PI

2001

1998

1994

1993

1992

Market introduction of capacitive
position sensors, implementationin piezo-based nanopositioning
systems

1991

1987

1970

Market introductionof six-axis parallelkinematic positioning
systems (Hexapods)

Market introductionof digital
control electronics
Newsubsidiaryin the USA

New
subsidiaryin Japan

New subsidiaries
in Great Britain
and France

16

W W W. P I . W S

Newsubsidiary
in ItalyIntroduction

2015

Acquisitionof majority sharesin miCos GmbH,
Eschbach, Germany

2014Market introductionof the NEXLINE®
high-performancepiezo linear drives

2017

Market introductionof the magnetic
PIMag® direct drives

2016

Market introductionof the PICMA®
multilayer piezo
actuators

Introductionof air bearings

Acquisition ofmajority sharesin ACS Motion
Control

2002

2004

2007

2011

Acquisitionof Nelson
Air Corp., USA

Market introductionof Q-Motion®
and PiezoMikes

PIRest active
shim piezo
technology

Engineered
motionplatforms

Market introductionof NEXACT®
piezo linear drivesNew
subsidiaryin China

New subsidiaries
in Korea andSingapore

New subsidiaries
in Taiwan and theNetherlands

17

MOTION|POSITIONING

Expert Consulting

Time for qualified technical consultation is crucial for the success of high-tech projects

The PI Group can respond precisely to what customers want: Specific requirements can often only be satisfied by customized solutions – solutions that canbe found by unconventional and creative thinking. Together with the customers,
PI plans and realizes individual solutions for the most varied applications andintegration levels. And that means that PI’s customers can always be sure thatthey will get the best solution every time.
Customers directly benefit from:
Highly Qualified Consultancy Through Trained Specialists
Individual advice often is key to solve a complex problem. PI sales engineers
are ready to come on site with all the time necessary for a solid understandingof the topic. Or they will gladly meet at the PI head office. All PI sales engineers
have a background in natural sciences or engineering, and have up to 20 yearsof experience in optical, micro- or nanopositioning technology.

18

W W W. P I . W SInternational Support
PI subsidiaries and distributors in many
countries across the world guarantee global
support – a decisive advantage, especiallyfor globally operating customers. PI has its
own sales and service offices in all important
markets. Moreover, the company maintains
testing devices for nanometrology on threecontinents. PI Shanghai and PI USA haveadditional development and manufacturingresources that allow rapid local reaction tocustom-engineered specifications.

Introduction

Engineering Design Expertiseand Customization

Unique Technological Breadth
The technological diversity of the PI Group is unrivalled all over the world. PI develops,
manufactures, and qualifies all its core technologies itself. PI is therefore not dependent oncomponents available on the market. That puts PI in a position to offer its customers the mostadvanced products for motion and positioning tasks – without technological restriction.
Customized Solutions
With this background, PI develops positioning solutions with innovative drive technologies
for high-tech applications worldwide. PI covers the whole motion range from finger-tip sized
nanopositioners to large-scale stages with long travel ranges, through their plethora of different drive and guiding systems.
Core Technologies
n I n-house manufacturing of piezo components and piezo actuatorsn M
 agnetic direct drives: linear motors and voice coiln A ir bearings, magnetic and flexure guidesn C omprehensive range of piezo motor technologiesnNanometrology sensors

n P arallel-kinematic systems for positioning in six axes (Hexapods)nMotion control technologynSoftwareMaximum performance of precision systems is achieved through extensive design and analysis expertise,using equipment built in-house with proprietary techniques. See here the modal analysis of a complex
multi-axis system that includes linear guide elements as well as mixed piezo drive technologies like PICMA®
multilayer actuators and PiezoWalk® walking drives, and PIMag® magnetic drives

19

MOTION|POSITIONING

Production Capabilities

PI’s flexibility in serial production allows for fast adaptation of both processes and quantities

A modern production management and an integrated management
system allow PI to guarantee the high quality of its products, processes,
and services. The continual improvement of organization and processes
is an integral part of the corporate culture. KAIZEN workshops and an
active innovation management are important elements for achieving
this.
The production processes for the standard range are made flexible by
the fractal production structure and it is therefore possible to manufacture even large series with full process control. Active, system-based
requirements management makes it possible to dispense with comprehensive storage facilities.

n

13,000 m² of overall production spacen

5,000 m² for cleanroomsn A
 ir-conditioned and vibration-proof measuringconditionsn V acuum chambers for startup and residual gas

analysisn M
 easuring technology with traceable, calibrated

measuring equipmentn M onitoring of piezo actuator technology frommaterial composition to final inspectionn I n-house manufacturing of positioning sensors

Vertical Production Range and Production Capacityn P
 roduction hall with measuring technology for

The product spectrum ranging from the two-ton hexapod to the 10-gram
nanopositioner requires PI to have the equipment and technologies at
its disposal that allow the systems to be manufactured, assembled, andqualified.

n F ractal production organization

20

W W W. P I . W S

heavy loads

Introduction

Vacuum Know-How

PI offers high-precision solutions for positioning in vacuum conditions to 10–10 hPa.
Positioning solutions in a vacuum follow clearly defined constraints. This applies tothe limited installation space, as well as prevention of contamination and excessive
heat input.
Selection of the optimum drive technology for the respective application and themechanical design must be matched exactly to the required load capacity andvelocity as well as the intended operating and planned duty cycles.
The handling regulations for vacuum positioning systems are just as important as
the design principles. Cleanrooms are available for assembling larger parts. Suitable
packaging and the corresponding instructions for the recipient are part of shipping.
Vacuum chambers are available in several sizes with vacuum levels down to 10–10 hPa,
where start-up and measurement of outgassing, but also interferometric measuring of
position accuracy under real operating conditions is possible.

At PI, several vacuum
chambers are available
in various sizes

21

MOTION|POSITIONING

From 1-off to Series:
OEM Users Benefit From Maximum Flexibility

PI serves both the research and industrial markets. The complete control over the design and manufacturing process provides our customers with significant competitive advantages. Optimized processes
allow PI to deliver customized products in quantities up to several 100,000 units per year at low cost andright on time. The range of OEM products offered by the PI Group varies widely, ranging from “bare”
actuators and sensors to highly integrated parallel-kinematic positioning systems. Evaluation of preproduction run samples, test procedures, production processes and quality management are all includedin the development process.
Servicesn G lobal account management: Close proximity to the customer thanks to international presencen R isk assessment from design to deliveryn D epending on the task: From the drive to the turnkey systemn C opy exactly policyn P reparation of internal and external certificationn P roduction of series of several 10,000 units in the shortest timen S ustainable spare parts servicen M anufacturing and testing capacities from functional samples to mass production

Standardized performance control with full documentation of individual measurement charts

22

W W W. P I . W SIntroduction

Global Service and After-Sales

On-site training is key to optimize and maximize the potential of new PI systems

Start-Up, User Training and Life Long Support

Contracted Services

PI is dedicated to supporting its customers right from the initial consultation
through to when a customer has purchased a PI system. Beyond that, PI’s services
division is committed to ensuring that every aspect of owning a PI system iscatered for.

Customers subscribing to Contractual Support Services will receive commitment fromPI to achieving agreed Service Levels. These
include responding to the customer’s firstcontact and providing remote technicalsupport, through to response times for a PI
expert to be on site, either to repair or replacea defective unit.

Global Coverage
Supported by 4 Global Service Hubs in Asia, China, Europe and USA, with field
product specialists working from these hubs, PI is able to support all technologies and customer applications via this global services team.
PI’s Standard On-Site Servicesn S
 et up and Commissioning – On-site support to un-box, set-up andcommission the PI systemn T raining Program – User training on software and programming,

through to optimization of system performancen M aintenance Systems Health Check – Preventative maintenance toprolong the life of the motion devicen S upport – Ongoing remote and on-site support to maximize system

uptime and provide maintenance for the whole life of any system

Extended Warranty
Most customer applications require PI’s
systems to be operational beyond the standard warranty period. Extending the warranty
for additional year(s), is simply extending thecustomers peace of mind and PI’s commitment that the product will not fail due to poor
workmanship or faulty materials. Shoulda customer’s system then fail due to these
conditions, PI will cover the costs to repair or
replace it.

23

MOTION|POSITIONING

Linear Stages

24

W W W. P I . W S

Linear Stages

PILine® Stages for High Dynamics ............................................................................................................................................

26

U-521 PILine® Linear Stage .............................................................................................	 26
U-523 PILine® Linear Stage .............................................................................................	 28

Q-Motion® Stages, UHV-Compatible and Most Compact ........................................................................................................

30

Q-521 Q-Motion Miniature Linear Stage .......................................................................	 30
Q-522 Q-Motion® Miniature Linear Stage .......................................................................	 36
Q-545 Q-Motion® Precision Linear Stage ........................................................................	 42®

NEXACT® PiezoWalk® Linear Stages for Higher Load Capacity ...............................................................................................

46

N-565 Linear Stage with the Highest Precision ...............................................................	 46
N-765 Precision Z Stage .................................................................................................	 48

25

MOTION|POSITIONING

U-521 PILine® Linear Stage
Compact Linear Stage with Ultrasonic Piezo Motor

U-521, dimensions in mmn P ositions small loads quickly and with precision: Velocity to 200 mm/s,

minimum incremental motion to 0.3 µm
n S pace-saving: Only 35 mm in width and 15 mm in heightn S elf-locking when switched off: Saves energy and reduces generationof heatn S
 ilent
n C
 ustomized versions on request

Applications>> Linear Encodern Autofocus systemsn Scanning Imaging>> PILine® Ultrasonic Piezomotors

n Micro manipulatorsn Handheld device automation>> Vacuum-Compatible Versionsn Sample positioning

Technology Glossary ....................... page 148

26

W W W. P I . W S

U-521.23

U-521.24

Unit

Tolerance

Active axesxx

Travel range

18

18

mm

Velocity, closed loop

200

200

mm/s

max.

Minimum incremental motion

2

0.3

µm

typ.

System resolution

0.4

0.1

µm

Bidirectional repeatability

±2

±0.2

µm

Linearity error (over the entire
travel range)

8

4

µm

Pitch

±300

±300

µrad

Yaw

±300

±300

µrad

Sensor type

Incremental encoder

Incremental encoder

Measuring principle

Optical

OpticalMeasuring method

Direct measuring

Direct measuring

Sensor resolution

0.4

0.1

µm

typ.

Compressive stress capacity

2

2

N

max.

Pull force capacity

2

2

N

max.

Motor type

PILine® ultrasonic piezo motor,
performance class 1

PILine® ultrasonic piezo motor,
performance class 1

Drive force

2

2

N

max.

Holding force

2

2

N

max.

1 × Sub-D 15 (m)1 × Sub-D 15 (m)Reference point switch

Optical

OpticalOperating temperature

0 to 40

0 to 40

Material

Aluminum, anodized

Aluminum, anodized

Mass (stage without cable andconnector)

40

40

g

Mass (stage with cable andconnector)

160

160

g

Cable length

1.5

1.5

m

Linear Stages

MotionPositioning

Mechanical properties

Drive properties

Connectors
Motor / sensor
Miscellaneous
°C

typ.

Specifications determined with the C-867.1U controller.
All specifications based on room temperature (22 °C ±3 °C).
Vacuum versions to 10–6 hPa available on request. Specifications for vacuum versions can differ.
Ask about custom designs!

Multi-axis setup consisting of two U-521
linear stages and a U-624 rotation stage,
without adapter plate

27

MOTION|POSITIONING

U-523 PILine® Linear Stage
Compact Linear Stage with Ultrasonic Piezo motorn F
 ast positioningn S
 pace-saving and lightn H
 igh guiding accuracyn H igh sensor resolution of 10 nm
n S
 elf-locking, no heat generation at restn L
 ow-noise operationn I ntegrated XY-stage U-723

U-523, dimensions in mm

Applications>> Linear Encodern Autofocus systems

n Sample positioning>> PILine® Ultrasonic Piezomotors

n Micro manipulatorsn Linescan imaging>> Vacuum-Compatible Versions
Technology Glossary ....................... page 148

28

W W W. P I . W S

Linear Stages

U-523.25

Unit

Tolerance

MotionActive axisx

Travel range

22

mm

Velocity

200

mm/s

max.
max.

Mechanical properties
Load capacity in z

5N

Mass without cable

70gLinear guide

Crossed roller bearing with
anti-creep system

Drive properties
Drive type

PILine® ultrasonic piezo motor,
performance class 1

Nominal force

2

N

typ.

Holding force

2

N

typ.

Positioning
Integrated sensor

Optical, incremental sensor

Sensor resolution

10

nm

Minimum incremental motion

0.1

µm

Reference point switch

Direction-sensing opticalreference point switch

typ.

Miscellaneous
Operating temperature range

0 to 40

Humidity

20 – 90 % rel., not condensing°C

Material

Aluminum, anodized

Motor / sensor connection

Sub-D 15 (m)Cable length

1.5m

Ask about custom designs!
Technical data specified at room temperature (22±3 °C) with C-867.1U.

29

MOTION|POSITIONING

Q-521 Q-Motion® Miniature Linear Stage
Smallest Linear Stage with Position Control, High Resolution and Affordable Pricen O nly 21 mm in width and 10 mm in heightn D irect position measurement with integrated

incremental encodern

Encoder resolution up to 1 nm

nMinimum incremental motion up to 2 nm

n M
 ulti-axis system setups with adapter plateor bracket (available as an option)n S
 uitable for vacuum to 10–6hPa, versions to

10–9 hPa available

Piezoelectric inertia drive
Piezo inertia drives are space-saving and affordable piezo-based drives withrelatively high holding forces and a virtually unlimited travel range. The inertia
drive principle is based on a single piezoelectric actuator that is controlledwith a modified sawtooth voltage provided by special driver electronics. The
actuator expands slowly and moves the runner. Due to its inertia, the runner isunable to follow the subsequent fast contraction of the actuator and remains
at its position. With an operating frequency of up to 20 kHz, the drives acting
directly on the runner and achieve velocities of max. 10 mm/s.
Direct-measuring principle
Versions with noncontact optical linear encoder available. Resolution 4 nm
or 1 nm, depending on the version. Versions with encoder have a reference
point switch.
Vacuum and nonmagnetic environments
All Q-Motion® linear stages are suitable for operation in high vacuum to 10–6 hPa.
Furthermore, ultrahigh vacuum variants for 10–9 hPa are also available. Nonmagnetic versions are available on request.

Applicationsn Fine adjustment of the smallest

components during assemblyn Photonics / Alignment

Applications

Q-521 stages make for mostcompact multi-axis setups.

>> Linear Encodern Beamline systems>> Q-Motion® Piezoelectric Inertia Driven Semiconductor technologyn Test laboratoriesn Microscopy

Technology Glossary ....................... page 148

30

W W W. P I . W S

Q-521.130

Q-521.140 /Q-521.14U

Q-521.230

Q-521.240 /Q-521.24U

Q-521.330

Q-521.340 /Q-521.34U

Q-521.x00 /Q-521.x0U

12 mm
travelrange,
resolution
4 nm

22 mm
travelrange,
resolution
4 nm

22 mm
travelrange,
resolution
1 nm, UHV
versionQ-521.24U

32 mm
travelrange,
resolution
4 nm

32 mm
travelrange,
resolution
1 nm, UHV
versionQ-521.34U

12 mm
to 32 mmtravelrange, open
loop, UHV
versions
Q-521.x0U

Unit

Linear Stages

Motion andpositioning

Active axis

X

12 mm
travelrange,
resolution
1 nm, UHV
versionQ-521.14U
X

X

X

X

X

X

Travel range

12

12

22

22

32

32

12 to 32

Integrated
sensorLinearencoder

Linearencoder

Linearencoder

Linearencoder

Linearencoder

Linearencoder–

Sensorresolution

4

1

4

1

4

1

–

nm

Minimumincremental
motion

8

2

8

2

8

2

–

nm

Unidirectional
repeatability
over entire
travel range

25

25

25

25

30

30

–

nm

Bidirectional
repeatability
over entire
travel range

40

40

40

40

50

50

–

nm

Unidirectional
repeatability
over 100 µm
travel range

12

12

12

12

12

12

–

Bidirectional
repeatability
over 100 µm
travel range

24

24

24

24

24

24

–

nm

Pitch / yaw
over entire
travel range

100

100

100

100

100

100

100

µrad

Pitch / yaw
over 100 µm
travel range

1

1

1

1

1

1

1

µrad

Maximum
velocity*

10

10

10

10

10

10

10

mm/s

mm

Mechanicalproperties
Load capacity

10

10

10

10

10

10

10

N

Length

30

30

32.2

32.2

42.2

42.2

30 to 42.2

mm

Width

21

21

21

21

21

21

21

mm

Height

10

10

10

10

10

10

10

mm

Piezoelectric
inertiadrive
1

Piezoelectric
inertia
drive

Piezoelectric
inertia
drive

Piezoelectric
inertia
drive

Piezoelectric
inertia
drive

Piezoelectric
inertia
drive

Piezoelectric
inertia
drive

1

1

1

1

1

1

N

1.3

1.3

1.3

1.3

1.3

1.3

1.3

N

Drive
properties
Motor type

Push / pullforce
Holding force,
power off

* Typical velocity at a control frequency of 20 kHz
For operation in a vacuum, we recommend a reduced duty cycle of 20 % and a maximum motor push / pull forceof 30 % compared to a standard environment. The intrinsic mass of the slider plate must be considered accordingly.
Ask about custom designs!

31

MOTION|POSITIONING

Q-521.130

Q-521.140 /Q-521.14U

Q-521.230

Q-521.240 /Q-521.24U

Q-521.330

Q-521.340 /Q-521.34U

Q-521.x00 /Q-521.x0U

Unit

Operatingtemperature
range

0 to 40

0 to 40

0 to 40

0 to 40

0 to 40

0 to 40

0 to 40°C

Material

Stainlesssteel

Stainlesssteel

Stainlesssteel

Stainlesssteel

Stainlesssteel

Stainlesssteel

Stainlesssteel

Miscellaneous

Cable length

1

1

1

1

1

1

1

Connector

Sub-D

Sub-D

Sub-D

Sub-D

Sub-D

Sub-D

Sub-D

Mass incl.
cable and
connector

110

Q-521.140:
110
Q-521.14U:
66

126

Q-521.240:
126
Q-521.24U:
78

135

Q-521.340:
135
Q-521.34U:
92

Q-521.100:
110
Q-521.200:
126
Q-521.300:
135
Q-521.10U:
66
Q-521.20U:
78
Q-521.30U:
92

Mass without
cable and
connector

24

Q-521.140:
24
Q-521.14U:
24

126

Q-521.240:
24
Q-521.24U:
34

48

Q-521.340:
48
Q-521.34U:
48

Q-521.100:
24
Q-521.200:
34
Q-521.300:
48
Q-521.10U:
24
Q-521.20U:
34
Q-521.30U:48

Recommended
controller

E-871,
E-873

E-871,
E-873

E-871,
E-873

E-871,
E-873

E-871,
E-873

E-871,
E-873

E-872

* Typical velocity at a control frequency of 20 kHz
For operation in a vacuum, we recommend a reduced duty cycle of 20 % and a maximum motor push / pull forceof 30 % compared to a standard environment. The intrinsic mass of the slider plate must be considered accordingly.
Ask about custom designs!

32

W W W. P I . W Smg

Linear Stages

Q-521.1xx, dimensions in mm. Note that the decimal places are separated by a comma in the drawings.

33

MOTION|POSITIONING

Q-521.2xx, Dimensions in mm. Note that the decimal places are separated by a comma in the drawings.

34

W W W. P I . W S

Linear Stages

Q-521.3xx, Dimensions in mm. Note that the decimal places are separated by a comma in the drawings.

35

MOTION|POSITIONING

Q-522 Q-Motion® Miniature Linear Stage
Piezo Motors for Small Dimensions, High Resolution, and a Favorable Pricen O nly 22 mm in width and 10 mm in heightn D irect position measurement withincremental encoder with up to 1 nm
resolutionn M inimum incremental motion up to 2 nmn X
 Y mounting without adaptern Q -622 rotation stage mountable without

adaptern S
 uitable for vacuum to 10–6hPa, versions

to 10 hPa available–9

Piezoelectric inertia drive
Piezo inertia drives are space-saving and affordable piezo-based drives withrelatively high holding forces and a virtually unlimited travel range. The inertia
drive principle is based on a single piezoelectric actuator that is controlledwith a modified sawtooth voltage provided by special driver electronics. The
actuator expands slowly and moves the runner. Due to its inertia, the runner isunable to follow the subsequent fast contraction of the actuator and remains
at its position. With an operating frequency of up to 20 kHz, the drives acting
directly on the runner and achieve velocities of max. 10 mm/s.
Direct-measuring principle
Versions with noncontact optical linear encoder available. Resolution 4 nm or
1 nm, depending on the version. Versions with encoder have a reference pointswitch.
Vacuum and nonmagnetic environments
All Q-Motion® linear stages are suitable for operation in high vacuum to 10–6 hPa.
Furthermore, ultrahigh vacuum variants are also available for 10–9 hPa. Nonmagnetic versions are available on request.

Applicationsn Fine adjustment of the smallest

components during assemblyn Photonics / Alignment

Applications

This 3-axis setup of Q-522 linear andQ-622 rotation stages offers XY and yaw
motion on a 22 mm × 22 mm footprint.

>> Linear Encodern Beamline systems>> Q-Motion® Piezoelectric Inertia Driven Semiconductor technology>> Vacuum-Compatible Versionsn Test laboratoriesn Microscopy

Technology Glossary ....................... page 148

36

W W W. P I . W S

Q-522.040 /Q-522.04U

Q-522.130

Q-522.140 /Q-522.14U

Q-522.230

Q-522.240 /Q-522.24U

Q-522.x00 /Q-522.x0U

6.5 mmtravelrange,
resolution
4 nm

13 mm
travelrange,
resolution
4 nm

13 mm
travelrange,
resolution
1 nm, UHV
versionQ-522.14U

26 mm
travelrange,
resolution
4 nm

26 mm
travelrange,
resolution
1 nm, UHV
versionQ-522.24U

6.5 mmto 26 mmtravelrange, open
loop, UHV
versions
Q-522.x0U

Linear Stages

Q-522.030

Unit

Motion andpositioning

Active axis

X

6.5 mmtravelrange,
resolution
1 nm, UHV
versionQ-522.04U
X

X

X

X

X

X

Travel range

6.5

6.5

13

13

26

26

6.5 to 26

Integrated
sensorLinearencoder

Linearencoder

Linearencoder

Linearencoder

Linearencoder

Linearencoder–

Sensorresolution

4

1

4

1

4

1

–

nm

Minimumincremental
motion

8

2

8

2

8

2

–

nm

Unidirectional
repeatability
over entire
travel range

25

25

25

25

30

30

–

nm

Bidirectional
repeatability
over entire
travel range

40

40

40

40

50

50

–

nm

Unidirectional
repeatability
over 100 µm
travel range

12

12

12

12

12

12

–

Bidirectional
repeatability
over 100 µm
travel range

24

24

24

24

24

24

–

nm

Pitch / yaw
over entire
travel range

100

100

100

100

100

100

100

µrad

Pitch / yaw
ov er 100 µm
travel range

1

1

1

1

1

1

1

µrad

Maximum
velocity*

10

10

10

10

10

10

10

mm/s

mm

Mechanicalproperties
Load capacity

10

10

10

10

10

10

10

N

Push / pull
force

1

1

1

1

1

1

1

N

Length

22

22

32

32

42

42

22 to 42

mm

Width

32

32

32

32

32

32

22

mm

Height

10

10

10

10

10

10

10

mm

* Typical velocity at a control frequency of 20 kHz
For operation in a vacuum, we recommend a reduced duty cycle of 20 % and a maximum motor push / pull forceof 30 % compared to a standard environment. The intrinsic mass of the slider plate must be considered accordingly.
Ask about custom designs!

37

MOTION|POSITIONING

Q-522.030

Q-522.040 /Q-522.04U

Q-522.130

Q-522.140 /Q-522.14U

Q-522.230

Q-522.240 /Q-522.24U

Q-522.x00 /Q-522.x0U

Unit

Piezoelectric
inertia
drive

Piezoelectric
inertia
drive

Piezoelectric
inertia
drive

Piezoelectric
inertia
drive

Piezoelectric
inertia
drive

Piezoelectric
inertia
drive

Piezoelectric
inertia
drive

Operatingtemperature
range

0 to 40

0 to 40

0 to 40

0 to 40

0 to 40

0 to 40

0 to 40

Material

Aluminum,steel

Aluminum,steel

Aluminum,steel

Aluminum,steel

Aluminum,steel

Aluminum,steel

Aluminum,steel

Mass, including cabling

107

107

118

118

128

128

68 to 88

g
m

Drive
properties
Motor type

Miscellaneous

Cable length

1

1

1

1

1

1

1

Connector

Sub-D

Sub-D

Sub-D

Sub-D

Sub-D

Sub-D

Sub-D

Recommended
controller

E-871,
E-873

E-871,
E-873

E-871,
E-873

E-871,
E-873

E-871,
E-873

E-871,
E-873

E-872

* Typical velocity at a control frequency of 20 kHz
For operation in a vacuum, we recommend a reduced duty cycle of 20 % and a maximum motor push / pull forceof 30 % compared to a standard environment. The intrinsic mass of the slider plate must be considered accordingly.
Ask about custom designs!

38

W W W. P I . W S°CLinear Stages
Q-522,000, dimensions in mm

Q-522,040, dimensions in mm

39

MOTION|POSITIONING

Q-522,100, dimensions in mm

Q-522,140, dimensions in mm

40

W W W. P I . W S

Linear Stages
Q-522,200, dimensions in mm

Q-522,240, dimensions in mm

41

MOTION|POSITIONING

Q-545 Q-Motion® Precision Linear Stage
High Forces and Small Design Due to Piezo MotorsnOnly 45 mm in widthnPush / pull force 8 NnIncremental sensors with position resolutionn X
 Y combinations without adapter plate

possiblen

Vacuum-compatible to 10–6 hPa (Q-545.xx0)nVacuum-compatible to 10–9 hPa (Q-545.xxU)

Piezoelectric inertia drive
Piezo inertia drives are space-saving and affordable piezo-based drives withrelatively high holding forces and a virtually unlimited travel range. The inertia
drive principle is based on a single piezoelectric actuator that is controlledwith a modified sawtooth voltage provided by special driver electronics. The
actuator expands slowly and moves the runner. Due to its inertia, the runner isunable to follow the subsequent fast contraction of the actuator and remains
at its position. With an operating frequency of up to 20 kHz, the drives acting
directly on the runner and achieve velocities of max. 10 mm/s.
Direct-measuring principle
Versions with noncontact optical linear encoder available. Resolution 1 nm.
Versions with encoder have a reference point switch.
Vacuum and nonmagnetic environments
All Q-Motion® linear stages are suitable for operation in high vacuum to 10–6 hPa.
Furthermore, ultrahigh vacuum variants are available for 10–9 hPa. Nonmagnetic
versions are available on request.

Applicationsn Fine adjustment of the smallest

components during assemblyn Photonics / Alignment

Applications

3-axis setup of
Q-545 linear stages.

>> Linear Encodern Beamline systems>> Q-Motion® Piezoelectric Inertia Driven Semiconductor technology>> Vacuum-Compatible Versionsn Test laboratoriesn Microscopy

Technology Glossary ....................... page 148

42

W W W. P I . W S

Q-545.140 /Q-545.14U

Q-545.200 /Q-545.20U

Q-545.240 /Q-545.24U

13 mm
travel range,
open loop

13 mmtravel range,
resolution 1 nm

26 mm
travel range,
open loop

26 mm
travel range,
resolution 1 nm

Active axis

X

X

X

X

Travel range

13

13

26

26

Integrated sensor–

Linear encoder–

Linear encoder
Analog, 1 Vpp

Unit

Tolerance

Motion and positioningmm

Sensor signal–

Analog, 1 Vpp–

Sensor resolution

–

1

–

1

nm

Minimumincremental motion

500 (open loop)

6500 (open loop)

6nm

Unidirectional
repeatability

–

0.018

–

0.018

µm

Bidirectional
repeatability–±0.018–±0.018µm

Rotational crosstalk

±50

±50

±80

±80

µrad

Linear crosstalk

±1

±1

±2

±2

µm

Maximum velocity,
open loop

10

10

10

10

mm/s

Maximum speed,
closed loop

–

10

–

10

mm/s

Reference point switch–

Optical–

Optical

typ.

min.

Mechanical properties
Load capacity

10

10

10

10

N

Axial stiffness

1.5

1.5

1.5

1.5

N/µm

±10 %

Lateral stiffness

9

9

10

10

N/µm

±10 %

Holding force, power off

8

8

8

8

N

min.

Push / pull force

8

8

8

8

N

typ.

Piezoelectric
inertia drive

Piezoelectric
inertia drive

Piezoelectric
inertia drive

Piezoelectric
inertia drive

Operatingtemperature range

0 to 50

0 to 50

0 to 50

0 to 50

Material

Aluminum

Aluminum

Aluminum

Aluminum

Mass, including cabling

216 / 210

216 / 210

245 / 240

245 / 240

Cable lengthQ-545.100: 2
Q-545.10U: 1

Q-545.140: 2
Q-545.14U: 1

Q-545.200: 2
Q-545.20U: 1

Q-545.240: 2
Q-545.24U: 1

Connector

Sub-D 15

Sub-D 15

Sub-D 15

Sub-D 15

Recommended
controller / driver

E-872

E-871, E-873

E-872

E-871, E-873

Drive properties
Motor type
Miscellaneous°Cg

Vacuum versions to 10–6 hPa are available under the following ordering number: Q-545.xx0.
Vacuum versions to 10–9 hPa available as Q-545.xxU.
For operation in a vacuum, we recommend a reduced duty cycle of 20 % and a maximum motor push / pull forceof 30 % compared to a standard environment. The intrinsic mass of the slider plate must be considered accordingly.
Ask about custom designs!

43

MOTION|POSITIONING

Linear Stages

Q-545.100 /Q-545.10U

Q-545,100, dimensions in mm

Q-545,140, dimensions in mm

44

W W W. P I . W S

Linear Stages
Q-545,200, dimensions in mm

Q-545,240, dimensions in mm

45

MOTION|POSITIONING

N-565 Linear Stage with the Highest Precision
NEXACT® Piezo Walking Drive with Subnanometer Encoder Resolution

N-565, dimensions in mm. N-565.160: a=75; b=70; c=80
N-565.260: a=100; b=100; c=110 N-565.360: a=150; b=150;
c=160.

n ltraprecision: 2 nm minimum incremental motionUand direct-measuring PIOne encoder with 0.5 nm resolutionnLong travel ranges: 13 mm, 26 mm or 52 mmn elf-locking when switched off: SavesS
energy and reduces generation of heatn

 ong lifetime and high reliability due toL
PiezoWalk® technologynCompact design: 65 mm width, 20 mm height

Applications>> PIOne Linear Encodern Optical alignment>> NEXACT® Piezo walking driven Mirror adjustment>> Vacuum-Compatible Versionsn Autofocus

Technology Glossary ....................... page 148

46

W W W. P I . W S

Linear Stages

N-565.160

N-565.260

N-565.360

Unit

Tolerance

Active axes

X

X

X

Travel range

13

26

52

mm

Velocity, closed loop

10

10

10

mm/s

System resolution

0.5

0.5

0.5

nm

Bidirectional repeatability

12

12

12

nm

typ.

Unidirectional repeatability

±5

±5

±5

nm

typ.

Straightness / flatness

±1

±1

±1.5

µm

typ.

Pitch

±30

±40

±80

µrad

typ.

Yaw

±30

±30

±30

µrad

typ.

Load capacity in z

20

20

20

N

max.

Overall mass

0.3

0.4

0.6

kg

±5 %

Unit

Tolerance

Motionmax.

Mechanical properties

N-565
Drive properties
Drive type

NEXACT® piezo walking drive

Push / pull force

10

N

max.

Holding force (passive)

10

N

min.

N-565.x60

Unit

Tolerance

Positioning
Integrated sensor

PIOne incremental linear encoder

Measuring principle

OpticalMeasuring method

Direct measuring

Sensor resolution

0.5

nm

Minimum incremental motion

2

nm

typ.

Unidirectional repeatability

±5

nm

typ.

Bidirectional repeatability

12

nm

typ.

Reference point switch

OpticalMiscellaneous
Operating temperature range

10 to 50

°C

Operating voltage–10 to 45

V

Material

Aluminum, black anodized

Motor connection

HD Sub-D 15 (m)Sensor connection

Sub-D 15 (f)Recommended controllers

E-861.1A1, E-712

47

MOTION|POSITIONING

N-765 Precision Z StageNEXACT® Piezo Walking Drive with Subnanometer Encoder Resolution

N-765.060, dimensions in mmn irect measurement with PIOne incrementalD
encoder, 0.5 nm resolutionnMin. incremental motion 1 nmnTravel range 6.5 mmnLoad capacity to 25 Nn

 an be mounted directly on an N-565 linearC
positionernCrossed-roller guides, anti-creep

N-765.060, dimensions in mm

Applications>> PIOne Linear Encodern Optical alignment>> NEXACT® Piezo walking driven Mirror adjustmentn Autofocus

Technology Glossary ....................... page 148

48

W W W. P I . W S

Linear Stages

N-765.060

Unit

Tolerance

Motion and positioning
Active axes

Z

Travel range

6.5

mm

System resolution

0.5

nm

Integrated sensor

PIOne linear encoder:
Incremental, optical,
direct measuring

Sensor resolution

0.5

nm

Minimum incremental motion

1

nm

typ.

Velocity, closed loop

2.5

mm/s

max.

Unidirectional repeatability

6

nm

typ.

Bidirectional repeatability

7

nm

typ.

Linear crosstalk on X
with motion on Z

1.8

µm

typ.

Linear crosstalk on Y
with motion on Z

2

µm

typ.

Rotational crosstalk on θX
with motion in Z

25

µrad

typ.

Rotational crosstalk on θY
with motion on Z

41

µrad

typ.

Rotational crosstalk on θZ
with motion on Z

34

µrad

typ.

25

N

max.

Mechanical properties
Load capacity
Drive properties
Motor type

NEXACT®
piezo walking drive

Drive force

20

N

max.

Holding force (passive)

25

N

max.

Operating voltage–10 to 45

V

Miscellaneous
Operating temperature range

10 to 50 °C

Mass

920

Material

Aluminum, black anodized

Cable length3

Connection

HD Sub-D 15 (m)Sensor connection

Sub-D 15 (f)Recommended controllers

E-861.1A1, E-712

g

±5 %

m

±10 mm

Ask about custom designs!

49

MOTION|POSITIONINGXY Stages and Microscopy Solutions

50

W W W. P I . W S

52

U-723 PILine® XY Stage ..................................................................................................	 52
U-751 XY Stage with Piezomotors ..................................................................................	 54

Microscopy Solutions ...............................................................................................................................................................

56

Overview ........................................................................................................................	 56
U-780 PILine® XY Stage System with Controller and Joystick ........................................	 58

51

MOTION|POSITIONING

XY Stages andMicroscopy Solutions

High-Efficiency PILine® XY Stages ............................................................................................................................................U-723 PILine® XY Stage
Compact XY Stage with Ultrasonic Piezo Motorsn F ast positioning in 2 axesn S pace-saving and lightn H
 igh guiding accuracyn H igh sensor resolution of 10 nm
n S
 elf-locking, no heat generation at restn L
 ow-noise operation

U-723, dimensions in mm

Applications>> Incremental Encodern Micro manipulators>> Linear Encodern Sample positioning>> PILine® Ultrasonic Piezomotors>> Vacuum-Compatible Versionsn Fieldscan imaging

Technology Glossary ....................... page 148

52

W W W. P I . W S

U-723.25

Unit

Tolerance

Active axesx, yTravel range

22 mm × 22 mm

Velocity

200

mm/s

max.

Load capacity in z

5

N

max.

Mass without cable

110gLinear guide

Crossed roller bearing with
anti-creep system

XY Stages andMicroscopy Solutions

MotionMechanical properties

Drive properties
Drive type

PILine® ultrasonic piezo motor,
performance class 1

Nominal force

2

N

typ.

Holding force

2

N

typ.

Positioning
Integrated sensor

Optical, incremental sensor

Sensor resolution

10

nm

Minimum incremental motion

0.1

µm

Reference point switch

Direction-sensing opticalreference point switch

typ.

Miscellaneous
Operating temperature range

0 to 40

Humidity

20 – 90 % rel., not condensing°C

Material

Aluminum, anodized

Motor / sensor connection

2 × Sub-D 15 (m)Cable length

2 × 1.5 m

Ask about custom designs!
Technical data specified at room temperature (22±3 °C) with C-867.2U2.

53

MOTION|POSITIONING

U-751 XY Stage with Piezomotors
Low-Profile and Fast, Direct Position Measurementn C ompact design: Only 32 mm in height,

no lead screw ducts or flanged motors
n Direct-measuringlinear encoder with 100 nm

resolutionn S
 elf-locking, no heat generation at rest,

no servo jittern C lear aperture 78 mm × 78 mm(at maximum displacement 65 mm × 65 mm)n N oncontact limit and reference point switches

U-751.24, dimensions in mm. Clear aperture 78 mm × 78 mm(at maximum displacement 65 mm × 65 mm).

Applications>> Incremental Encodern Micro manipulators>> Linear Encodern Sample positioning>> PILine® Ultrasonic Piezomotorsn>> Vacuum-Compatible Versions

Fieldscan imaging

Technology Glossary ....................... page 148

54

W W W. P I . W S

U-751.24

Unit

Tolerance

Active axesx, yTravel range

25 mm × 25 mm

Pitch

±50

µrad

typ.

Yaw

±50

µrad

typ.

Velocity, closed loop

100

mm/s

max.

Load capacity (1)

50

N

max.

Holding force (passive)

6

N

max.

N

max.

XY Stages andMicroscopy Solutions

MotionMechanical properties

Drive properties
Motor type

PILine® ultrasonic piezo motor,
performance class 2

Drive force

7

Positioning
Sensor type

Incremental, optical,
direct measuring

Sensor resolution

0.1

µm

typ.

Minimum incremental motion

0.3

µm

typ.

Bidirectional repeatability

±0.3

µm

Reference point switch

OpticalLimit switches

Hall effectMiscellaneous
Operating temperature range–20 to 50

Material

Al (black anodized)

°C

Mass

1.8

Motor / sensor connection

2 × Sub-D 15 (m)Cable length

1.5

kg

±5 %

m

±10 mm(1) At max. velocity 10 N.
Ask about custom designs!

55

MOTION|POSITIONING

Microscopy Solutions

Piezo stages are ideal for moving the objective(PIFOC, top) and / or the sample (XYZ sample
scanning, middle). The small-stroke piezo stages
can be supplemented by low-profile PILine®
Scanning Stages for large travel ranges (bottom)

Positioning Tasks in MicroscopyLong Range PILine® XY Scanning Stages

Modern microscopic techniques have some similar basic
requirements in regard to the positioning elements: compact
design and very high accuracy which refers to precision positioning, high repeatability and short settling time. For example,
Z-stacks of samples are realized by many individual images inas short a time as possible to avoid damage of the biologicalcells. Next to that, the observation of dynamic processes is an
important application scenario as well – both tasks place great
demands on the dynamics of the stage itself.

Automated tasks require positioning over larger ranges of approx. 130 mm × 80 mm with high speed and precision. PILine®
stages are characterized by a low profile, an extremely large
dynamic range (10 μm/s to 100 mm/s) and very good velocity constancy, position stability and repeatability. These stages
are also very well suited for super resolution microscopy applications such as STORM, PALM, STED or SIM, which place very
high demands on the stability.
System Packages?

Sample or Objective?
Fast focusing in the direction of the optical axis can be done bymoving the objective, for example. PIFOC systems with theireasily exchangeable PI QuickLock thread inserts, and large apertures, offer up to 2000 µm of travel for the objective or turret.
Z stack acquisition, autofocus / focus tracking or drift compensation are typical use cases.

Preconfigured packages that include the appropriate controller and software are available for the major product lines. PI
controllers come with high resolution digital interfaces (USB,
Ethernet, RS-232), high-speed analog interfaces, as well as solid
software support for all major image acquisition packages.

Sample fine positioning can be enhanced by offering additionalmotion in XY for high-dynamic tracking, e.g. to examine motionof individual molecules. PInano® tracking stages offer XYZ motion
in one compact package.

56

W W W. P I . W S

P-737.xxx
PIFOC specimenfocusing Z stage

•

•

•

•

•

U-780.DOS
PILine® XY stage system
for Olympus microscopes•

U-780.DLSPILine® XY stage system
for Leica microscopes•

U-760.DNOSPILine® XY stage system for
Nikon / Olympus microscopes

•

•*

•**

•

M-545.2MN
XY stage for Nikon
microscopes TI series

•

•*

•**

•

M-545.2MO
XY stage for Olympus
microscopes IX2, IX3

•

•*

•**

•

M-545.2ML
XY stage for Leica
microscopes DMI series

•

•*

•**

•

M-545.2MZ
XY stage for Zeiss
microscopes Axio Observer

•

•*

•**

•

P-736.ZR1S
P-736.ZR2S
PInano® Z piezoslide sanner system•

PD73Z2COW
PD73Z2ROW
PInano® Z piezo
scanner system

U-780.DNSPILine® XY stage system
for Nikon microscopes•

XY Stages andMicroscopy Solutions

P-541.2xx / P-541.Txx
P-541.Zxx / P-542.2xx
Piezo nanopositioning
stage

•

P-736.ZCN2S
P-736.ZRN2S
PInano® Z piezo
scanner system•

P-545.xR8S
P-545.xC8S
P-545.3D8S
PInano® piezo system

P-733.2xx
P-733.3xx
Piezo nanopositioning
stage

Compatibility of Piezo Scanners with Manual, Motorized and PILine® XY Microscope Stages* With P-736.AP1 adapter plate / ** With P-733.AP1 adapter plate

P-736.PDN

P-736.PDO

P-545.PD3

Microtiter
plate
holder

P-736.WPN

P-736.WPO

Universal
holder

P-736.UHN*

M-687.AP1*

Universal
holdingplateP-545.PP3

P-542.PD1

M-545.2MN
M-545.2MO
M-545.2ML
M-545.2MZ

P-545.PD3

U-760.DNOSPetri dishholder

U-780.DLS

P-545.SH3*

U-780.DOSP-736.SHO*

U-780.DNS

P-736.SHN*

P-737.AP1*

P-736.SHN*
P-736.SHO*

P-736.SHN*
P-736.SHO*

P-736.SHN*
P-736.SHO*

P-545.SH3*
withM-545.SHP

P-545.SH3*
withM-545.SHP

P-737.AP2

P-736.PDN
P-736.PDO

P-736.PDN
P-736.PDO

P-736.PDN
P-736.PDO

P-545.PD3
with
M-545.SHP
adapterplate

P-545.PD3
with
M-545.SHP
adapterplate

P-736.WPN
P-736.WPO

P-736.WPN
P-736.WPO

P-736.WPN
P-736.WPO

P-736.UHN*
M-687.AP1*

P-736.UHN*
M-687.AP1*

P-736.UHN*
M-687.AP1*
P-545.PP3
with
M-545.SHP

P-545.PP3
with
M-545.SHP

P-737.xxx

PD73Z2COW
PD73Z2ROW

P-545.SH3*

P-541.2xx
P-541.Txx
P-541.Zxx
P-542.2xx

P-736.ZCN2S
P-736.ZRN2SMicroscopeslideholder

P-736.ZR1S
P-736.ZR2S

P-545.xR8S
P-545.xC8S
P-545.3D8S

Inserts for PI Sample Stages

P-542.SH1*

P-545.PP3

M-545.SHP adapter plate* Also available: P-545.C18 Coverslip holder (for 18 mm × 18 mm coverslips),
P-545.C22 (for 22 mm × 22 mm coverslips) and P-545.C25 (for 25 mm × 25 mm coverslips)

57

MOTION|POSITIONING

U-780 PILine® XY Stage Systemwith Controller and JoystickStable, Dynamic, Low ProfilenHigh velocity constancy at 10 µm/s

High-resolution PILine® piezo linear drivenVelocity to 120 mm/s, resolution 0.1 µm

Self-locking at rest. Low noise. Highest stability
due to low thermal load and no lubricants. Large
dynamics range of 10 µm/s to 120 mm/s, idealfor operating with joystick and automated highcontent processes.

n T
 ravel ranges to 135 mm × 85 mm (depending on model type)n F
 or inverted microscopes, freely revolving nosepiecen C ompact, low-profile design: Unrestricted access to the sample
n E
 xtensive accessories: Z sample scanners, microscope slide holder

Highly accurate position measuring withincremental linear encoderand holder for Petri dishes and microtiter plates

Reference-class microscope XY stage
System with controller and joystick. Large clear aperture 160 mm × 110 mm.
Suitable for the following inverted microscopes:nNikon Eclipse Ti-E/Ti-U/Ti-SnOlympus IX2nLeica DMI

Noncontact optical encoders measure the actual
position directly at the motion platforms with thegreatest accuracy so that nonlinearity, mechanicalplay or elastic deformation have no influence on
position measuring.
User software
PIMikroMove. PI General Command Set (GCS).
Drivers for NI LabVIEW. Compatible with µManager, MetaMorph, Andor iQ, MATLAB.

Applications>> Extensive Software Packagen Scanning microscopyn Sample positioning>> Incremental Encodern Metrologyn Biotechnology>> Linear Encoder>> PILine® Ultrasonic Piezomotors
Technology Glossary ....................... page 148

58

W W W. P I . W S

U-780.DNS

U-780.DOS

U-780.DLS

System with
M-687.UN for
Nikon microscopes

System with
M-687.UO for
Olympusmicroscopes

System with
M-687.UL for
Leica microscopes

Unit

Tolerance

Active axes

X, Y

X, Y

X, Y

Travel range

135 mm × 85 mm

100 mm × 75 mm

135 mm × 85 mm

Integrated sensor

Linear encoder

Linear encoder

Linear encoder

Sensor resolution

0.1

0.1

0.1

µm

Bidirectional
repeatability

±0.3

±0.3

±0.3

µm

Pitch / yaw

±300

±300

±300

µrad

typ.

Velocity

120

120

120

mm/s

max.

Reference point switch

Optical, 1 µm
repeatability

Optical, 1 µm
repeatability

Optical, 1 µm
repeatability

Limit switches

Hall effect

Hall effect

Hall effect

25

25

25

N

max.

PILine® ultrasonicpiezo motor, performance class 2

PILine® ultrasonicpiezo motor, performance class 2

PILine® ultrasonicpiezo motor, performance class 2

N

max.

20 to 40

20 to 40

20 to 40°C

XY Stages andMicroscopy Solutions

Motion and positioning

Mechanical properties
Load capacity
Drive properties
Motor type

Miscellaneous
Operating temperature
range
Material

Al (black anodized)

Al (black anodized)

Al (black anodized)

Mass of the stage

4.2

3.2

4.2

Interface /communication

USB, RS-232, SPI,
Ethernet

USB, RS-232, SPI,
Ethernet

USB, RS-232, SPI,
Ethernet

I/O lines

4 analog / digital inputs

4 analog / digital inputs

4 analog / digital inputs

4 digital outputs tomini DIN, 9-pin

4 digital outputs tomini DIN, 9-pin

4 digital outputs tomini DIN, 9-pin

Digital: TTL

Digital: TTL

Digital: TTL

Analog: 0 to 5 V

Analog: 0 to 5 V

Analog: 0 to 5 V

PI General CommandSet (GCS)

PI General CommandSet (GCS)

PI General CommandSet (GCS)

kg

±5 %

Piezo motor controller

Command set
User software

PIMikroMove

PIMikroMove

PIMikroMove

Software drivers

GCS DLL (with code
examples for the mostcommon programming
languages such as C++,
C#, VB.NET, Python,Delphi), driver for NILabVIEW, MATLAB
library

GCS DLL (with code
examples for the mostcommon programming
languages such as C++,
C#, VB.NET, Python,Delphi), driver for NILabVIEW, MATLAB
library

GCS DLL (with code
examples for the mostcommon programming
languages such as C++,
C#, VB.NET, Python,Delphi), driver for NILabVIEW, MATLAB
library

Supported functions

Startup macro, macro,data recorder for recording operating datasuch as motor voltage,velocity, position or
position error

Startup macro, macro,data recorder for recording operating datasuch as motor voltage,velocity, position or
position error

Startup macro, macro,data recorder for recording operating datasuch as motor voltage,velocity, position or
position error

Controller dimensions

312 mm × 153.4 mm ×59.3 mm (incl. mounting rails)

312 mm × 153.4 mm ×59.3 mm (incl. mounting rails)

312 mm × 153.4 mm ×59.3 mm (incl. mounting rails)

59

MOTION|POSITIONING

M-687.UL for Leica microscopes, dimensions in mm

M-687.UO for Olympus microscopes, dimensions in mm

60

W W W. P I . W S

XY Stages andMicroscopy Solutions

M-687.UN for Nikon microscopes, dimensions in mm

61

MOTION|POSITIONING

Rotation Stages

62

W W W. P I . W S

PILine® Rotation Stages with High Dynamical Bandwidth ......................................................................................................

64

U-624 PILine® Rotation Stage .........................................................................................	 64
U-628 PILine® Rotation Stage .........................................................................................	 66
U-651 Rotation Stage with Low-Profile Design ...............................................................	 68

Q-Motion® Stages, UHV-Compatible and Most Compact ........................................................................................................

70

Q-614 Q-Motion Miniature Rotation Stage ....................................................................	 70
Q-622 Q-Motion® Miniature Rotation Stage ....................................................................	 72
Q-632 Q-Motion® Rotation Stage ....................................................................................	 74

63

MOTION|POSITIONING

Rotation Stages®

U-624 PILine® Rotation Stage
Miniature Stage with Ultrasonic Piezo Motor

U-624, dimensions in mmn xtremely space-saving: Edge lengthE
only 30 mm, height 12 mmn ositions small loads quickly and withP
precision: Velocity to 720 °/s, minimum
incremental motion to 105 µradnUnlimited rotation range >360°nDrive torque 10 mNmn elf-locking when switched off: SavesS
energy and reduces generation of heatnLight and low noise

Applications>> Incremental Encodern Optical filter alignment>> PILine® Ultrasonic Piezomotors

n Angular correctionsn Micro manipulators

Technology Glossary ....................... page 148

64

W W W. P I . W S

U-624.03

Unit

Tolerance

MotionActive axes

θZ

Rotation range

>360

°

Velocity, closed loop

720

°/s

max.

Minimum incremental motion

105

µrad

typ.

Bidirectional repeatability

±210

µrad

Positioning
SensorSensor type

Incremental encoder

Sensor resolution

35

µrad

Load capacity / axial force

1

N

max.

Holding force

0.01

Nm

max.

Nm

max.

Rotation Stages

Mechanical properties

Drive properties
Motor type

PILine® ultrasonic piezo motor,
performance class 1

Drive torque clockwise /counterclockwise (θZ)

0.01

Connectors
Motor / sensor

1 × Sub-D 15 (m)Miscellaneous
Reference point switch

OpticalOperating temperature

0 to 40

Material

Anodized aluminum

Mass

130

g

±5 %

Cable length

1.5

m

typ.

°C

All specifications based on room temperature (22 °C ±3 °C).
Ask about custom designs!

Multi-axis setup consisting of two U-521
linear stages and a U-624 rotation stage,
without adapter plate

65

MOTION|POSITIONING

U-628 PILine® Rotation Stage
Miniature Stage with Ultrasonic Piezo Motor and Central Opening

U-628, dimensions in mmnCompact: Edge length 50 mm, height 19 mm

n P
 ositions loads quickly and with precision:

Velocity to 720 °/s, minimum incremental
motion to 51 µradn

Unlimited rotation range >360°n

Drive torque 25 mNm

n S elf-locking when switched off: Saves energy

and reduces generation of heatn C
 entral aperture for more fields of application

Applications>> Incremental Encodern Optical filter alignment>> PILine® Ultrasonic Piezomotors

n Angular corrections>> Vacuum-Compatible Versionsn Micro manipulators

Technology Glossary ....................... page 148

66

W W W. P I . W S

U-628.03

Unit

Tolerance

MotionActive axes

θZ

Rotation range

>360

°

Velocity, closed loop

720

°/s

max.

Minimum incremental motion

51

µrad

typ.

Bidirectional repeatability

±102

µrad

Positioning
Sensor type

Incremental encoder

Sensor resolution

17

µrad

Load capacity / axial force

5

N

max.

Holding force

0.03

Nm

max.

Nm

max.

Rotation Stages

Mechanical properties

Drive properties
Motor type

PILine® ultrasonic piezo motor,
performance class 1

Drive torque clockwise /counterclockwise (θZ)

0.025

Connectors
Motor / sensor

1 × Sub-D 15 (m)Miscellaneous
Reference point switch

OpticalOperating temperature

0 to 40

Material

Anodized aluminum

Mass

300

g

±5 %

Cable length

1.5

m

typ.

°C

All specifications based on room temperature (22 °C ±3 °C).
Vacuum versions to 10–6 hPa available on request. Specifications for vacuum versions can differ.
Ask about custom designs!

67

MOTION|POSITIONING

U-651 Rotation Stage with Low-Profile Design
Fast PILine® Direct Drive and Central Opening

U-651: Dimensions and position of the 0° mark [1] after the reference point definition.
Dimensions in mm. Note that the decimal places are separated by a comma in the drawings.

n

Low profile of only 14 mm

n P
 ositions larger loads quickly and with

precisionnUnlimited rotation range >360°n D
 rive torque to 0.3 Nm in both directionsof rotationn S
 elf-locking when switched off: Savesenergy and reduces generation of heatnCentral aperture for more fields of applicationn

Crossed-roller guides, anti-creep

Applications>> Incremental Encodern Optical filter alignment>> PILine® Ultrasonic Piezomotors

n Angular corrections>> Vacuum-Compatible Versionsn Micro manipulators

Technology Glossary ....................... page 148

68

W W W. P I . W S

U-651.03 /U-651.03V

U-651.04 /U-651.04V

Unit

Tolerance

MotionActive axes

θZ

θZ

Rotation range

>360

>360

°

Velocity, closed loop

540

540

°/s

max.

Minimum incremental motion

27

12

µrad

typ.

Bidirectional repeatability

±54

±24

µrad

Sensor type

Incremental encoder

Incremental encoder

Sensor resolution

9

4

µrad

Load capacity / axial force

20

20

N

max.

Holding force

0.3

0.3

Nm

max.

Motor type

PILine® ultrasonic piezo motor,
performance class 2

PILine® ultrasonic piezo motor,
performance class 2

Drive torque clockwise /counterclockwise (θZ)

0.3

0.3

Nm

max.

1 × Sub-D 15 (m)1 × Sub-D 15 (m)Reference point switch

Optical

OpticalOperating temperature

0 to 40

0 to 40

Material

Anodized aluminum

Anodized aluminum

Mass

500

500

g

±5 %

Cable length

1.5 (model .03)
1.0 (model .03V)

1.5 (model .04)
1.0 (model .04V)

m

±10 %

Rotation Stages

Mechanical properties

Drive properties

Connectors
Motor / sensor
Miscellaneous°C

All specifications based on room temperature (22 °C ±3 °C).
Vacuum versions to 10–6 hPa available on request. Specifications for vacuum versions can differ.
Ask about custom designs!
The U-651 series replaces the M-660 series.

69

MOTION|POSITIONING

Q-614 Q-Motion® Miniature Rotation Stage
Minimum Dimensions: 14 mm Turntable Diametern

Only 18 mm in width and 10 mm in heightnRotation range >360°n

Velocity 70 °/snDrive torque 5 mN·mn S
 uitable for vacuum to 10–6hPa, versions

to 10–9 hPa available

Q-614, dimensions in mm

Applicationsn Fine adjustment of the smallest

components during assemblyn Photonics / Alignment

Applications>> Q-Motion® Piezoelectric Inertia Drive>> Vacuum-Compatible Versionsn Microscopyn Beamline systemsn Semiconductor technologyn Test laboratories

Technology Glossary ....................... page 148

70

W W W. P I . W S

Q-614.900

Q-614.90U

θZ

Unit

Tolerance

Motion and positioning
Active axis

θZ

Rotation range

>360

>360

°

Resolution

1 (1)

1 (1)

µrad

Minimum incremental motion

100 (1)100 (1)µrad

Maximum velocity, open-loop

70

70

°/s

Load capacity

1

1

N

Holding torque, power off

6

6

mN·m

min.

Torque

5

5

mN·m

typ.

Length

18

18

mm

Width

18

18

mm

Height1010mm

Turntable diameter

14

14

mm

Piezoelectric inertia drive

Piezoelectric inertia drive

Operating temperature range

0 to 40

0 to 40

Material

Aluminum, steel

Aluminum, steel

Mass without cable

9

9

g

Cable length

1

1

m

Connector

Sub-D 15 (m)Sub-D 15 (f)Recommended controller

E-872

E-872

typ.

Rotation Stages

Mechanical properties

Drive properties
Motor type
Miscellaneous°C(1) open loop
Ask about customized versions!
For operation in a vacuum, we recommend a reduced duty cycle of 20 %and a reduced rotation speed of 50 % compared to a standard environment.

71

MOTION|POSITIONING

Q-622 Q-Motion® Miniature Rotation Stage
Minimum Dimensions: 22 mm Turntable Diameter

Q-622, dimensions in mmn

Only 22 mm in width and 10 mm in heightn D irect position measurement withincremental encoder with 0.55 µradresolutionn U
 p to 2.2 µrad minimum incremental motionnVelocity 70 °/sn M ountable on the Q-522 linear stage without

adaptern S
 uitable for vacuum to 10–6hPa, versions to

10–9 hPa available

Applicationsn Fine adjustment of the smallest

components during assemblyn Photonics / Alignment

Applications>> Incremental Encodern Microscopy>> Q-Motion® Piezoelectric Inertia Driven Beamline systems>> Vacuum-Compatible Versionsn Semiconductor technologyn Test laboratories

Technology Glossary ....................... page 148

72

W W W. P I . W S

Q-622.930

Q-622.900

Q-622.90U

Unit

Tolerance

Miniature rotation
stage with position
sensor for closedloop operation

Miniature rotation
stage without
position sensor

Miniature rotation
stage, without
position sensor for
ultrahigh vacuum
to 10–9 hPa

Active axis

θZ

θZ

θZ

Rotation range

>360

>360

>360

Integrated sensor

Incremental encoder––

Sensor resolution

0.55

–

–

µrad

Minimum incremental motion

2.2

100 (1)100 (1)µrad

Unidirectional repeatability

3

–

–

Maximum velocity, open loop

70

70

70

°/s

Load capacity

1

1

1

N

Holding torque, power off

6

6

6

mN·m

min.

Torque

5

5

5

mN·m

typ.

Length

22

22

22

mm

Width

22

22

22

mm

Height

10

10

10

mm

Turntable diameter

22

22

22

mm

Piezoelectric
inertia drive

Piezoelectric
inertia drive

Piezoelectric
inertia drive

Operating temperature range

0 to 40

0 to 40

0 to 40

Material

Aluminum, steel

Aluminum, steel

Aluminum, steel

Mass without cable

15

12

12

g

Cable length

1

1

1

m

Connector

Sub-D 15 (m)Sub-D 15 (m)Sub-D 15 (f)Recommended controller

E-873

E-872

E-872

Motion and positioning°

Rotation Stages

typ.

Mechanical properties

Drive properties
Motor type
Miscellaneous°C(1) open loop
Ask about customized versions!
For operation in a vacuum, we recommend a reduced duty cycle of 20 %and a reduced rotation speed of 50 % compared to a standard environment.

This 3-axis setup of Q-522 linear andQ-622 rotation stages offers XY and yaw
motion on a 22 mm × 22 mm footprint.

73

MOTION|POSITIONING

Q-632 Q-Motion® Rotation Stage
Compact Through Piezo Motor: 30 mm Turntable Diameter

Q-632, dimensions in mmn

Only 32 mm in width and 8 mm in heightn D irect position measurement withincremental encoder with 0.75 µradresolution (optional)n

Up to 3 µrad minimum incremental motionnRotation range >360°n

Velocity 45 °/sn S uitable for vacuum to 10–6hPa, versions to

10–9 hPa available

Applicationsn Fine adjustment of the smallest

components during assemblyn Photonics / Alignment

Applications>> Incremental Encodern Microscopy>> Q-Motion® Piezoelectric Inertia Driven Beamline systems>> Vacuum-Compatible Versionsn Semiconductor technologyn Test laboratories

Technology Glossary ....................... page 148

74

W W W. P I . W S

Q-632.930

Q-632.900

Q-632.90U

Unit

Tolerance

Rotation stage withposition sensor
for closed-loop
operation

Rotation stage
without position
sensorRotation stage,
without position
sensor for ultrahighvacuum to 10–9 hPa

Active axis

θZ

θZ

θZ

Rotation range

>360

>360

>360

Integrated sensor

Incremental encoder––

Sensor resolution

0.75

–

–

µrad

Minimum incremental motion3

36 (1)

36 (1)µradtyp.

Unidirectional repeatability

6

–

–

µrad

typ.

Maximum velocity, open loop

45

45

45

°/s

Load capacity

1

1

1

N

Holding torque, power off

7

7

7

mN·m

min.

Torque

6

6

6

mN·m

typ.

Length

32

32

32

mm

Width

32

32

32

mm

Height

8

8

8

mm

Turntable diameter

30

30

30

mm

Piezoelectric inertia
drive

Piezoelectric inertia
drive

Piezoelectric inertia
driveOperating temperature range

0 to 40

0 to 40

0 to 40

Material

Aluminum, steel

Aluminum, steel

Aluminum, steel

Mass without cable

25

21

21

g

Cable length

1

1

1

m

Connector

Sub-D

Sub-D

Sub-D

Recommended controller

E-873

E-872

E-872

Motion and positioning

Rotation Stages°

Mechanical properties

Drive properties
Motor type
Miscellaneous°C(1) open loop
Ask about customized versions!
For operation in a vacuum, we recommend a reduced duty cycle of 20 %and a reduced rotation speed of 50 % compared to a standard environment.

75

MOTION|POSITIONING

Parallel Kinematics / Hexapods

76

W W W. P I . W SParallel-Kinematic Q-Motion® Designs, UHV and Cleanroom Compatible ..............................................................................

78

Q-845 Q-Motion® SpaceFAB ...........................................................................................	 78
Q-821 Q-Motion® Miniature SpaceFAB Robot ................................................................	 80

NEXACT® PiezoWalk® Hexapod for Higher Load Capacity .......................................................................................................

82

N-865 NEXACT SpaceFAB ............................................................................................	 82

Parallel Kinematics /Hexapods®

77

MOTION|POSITIONING

Q-845 Q-Motion® SpaceFAB
High Precision and High Stiffnessn

Six degrees of freedomn ± 7 mm travel range in X and Y, and ±5 mm

in Z
n ±
 7° rotation range in θX, θY, and ±8° in θZ
n 1
 0 N load capacity, center mountedn S
 elf-locking, no heat generation at rest

Applications
components during assemblyn Photonics / Alignment

Applications

Crossed roller guides, anti-creepnVacuum-compatible to 10–6 hPa

Bottom and side view of the Q-845.140, dimensions in mm.
The reference position corresponds to the center positionof all axes

Top view of the Q-845.140, dimensions in mm.
The reference position corresponds to the center positionof all axesn Fine adjustment of the smallestn>> Parallel Kinematics, Hexapods
n Microscopy>> Q-Motion® Piezoelectric Inertia Driven Beamline systems>> Vacuum-Compatible Versionsn Semiconductor technologyn Test laboratories

Technology Glossary ....................... page 148

78

W W W. P I . W S

Q-845.140

Unit

Tolerance

Motion and positioning
Active axes

X, Y, Z, θX, θY, θZ

Integrated sensor

Incremental linear encoder

Travel range* in X, Y

±7

Travel range* in Z

±5mm

Rotation range* in θX, θY±7°Rotation range* in θZ±8°

Sensor resolution

1

nm

Minimum incremental motionin X, Y

6

nm

typ.

Minimum incremental motion in Z

20

nm

typ.

Minimum incremental motionin θX, θY, θZ

0.9

µrad

typ.

Unidirectional repeatability in X, Y

±30

nm

typ.

Unidirectional repeatability in Z

±35

nm

typ.

Unidirectional repeatability in θX

±20

µrad

typ.

Unidirectional repeatability in θY

±10

µrad

typ.

Unidirectional repeatability in θZ

±6

µrad

typ.

Backlash in X, Y

40

nm

typ.

Backlash in Z

60

nm

typ.

Backlash in θX, θY

35

µrad

typ.

Backlash in θZ

20

µrad

typ.

Max. velocity in X, Y, Z

5

mm/s

max.

Max. angular velocity in θX, θY, θZ

50

mrad/smax.

Stiffness in X, Y

1

N/µm

Stiffness in Z

2

N/µm

Load capacity in X, Y

5

N

max.

Load capacity in Z
(base plate horizontal)

10

N

max.

Holding force, power off(base plate horizontal /any orientation)

20 / 10N

max.

Permissible torque in θX, θY, θZ

0.5

N·m

max.

Drive type

Piezoelectric Inertia Drive

Parallel Kinematics /Hexapods

mm

Mechanical properties

Miscellaneous
Operating temperature range

0 to 40

Connection

6x Sub-D 15 (m)°CMaterial

Stainless steel, aluminum

Mass

1.9

kg

±5 %

Mass without cable and connector

1.2

kg

±5 %

Cable length2m±10 mmTechnical data specified at 20±3 °C.
Ask about custom designs!
* The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent.
The data for each axis in this table shows its maximum travel range, where all other axes and the pivot point are at the reference position.
For operation in a vacuum, we recommend a reduced duty cycle of 20 % and a maximum motor push / pull force of 30 % compared to a standard environment.
The intrinsic mass of the slider plate must be considered accordingly.

79

MOTION|POSITIONING

Q-821 Q-Motion® Miniature SpaceFAB Robot
Piezo-Motorized Inertia Drive, only 80 mm Side Length

Q-821.140, dimensions in mmnSix-axis microrobotics systemn ± 6 mm travel range in X and Y, and ±3 mm

in Z
n±6° rotation range in θX, θY, and ±16.5° in θZn

1 nm sensor resolutionnCrossed roller guides, anti-creep

Applicationsn Fine adjustment of the smallest

components during assemblyn Photonics / Alignment

Applications>> Parallel Kinematics, Hexapods>> Q-Motion® Piezoelectric Inertia Driven Microscopyn Beamline systemsn Semiconductor technologyn Test laboratories

Technology Glossary ....................... page 148

80

W W W. P I . W S

Q-821.140

Unit

Tolerance

Motion and positioning
Active axes

X, Y, Z, θX, θY, θZ

Integrated sensor

Incremental, optical,
direct measuring

Travel range in X, Y

±6

Travel range in Z

±3mm

Rotation range in θX, θY±6°Rotation range in θZ

±16.5

°

Sensor signal

Analog sin / cos, differential,
1 Vpp

Sensor resolution

1

nm

Step size in full step mode

0.4

µm

Operating frequency in full step
mode

10

kHz

Minimum incremental motionin X, Y

0.01

µm

mm

Minimum incremental motion in Z

0.02

µm

typ.

Minimum incremental motion inθX, θY, θZ

0.9

µrad

typ.

Unidirectional repeatability in X

±0.04

µm

typ.

Unidirectional repeatability in Y

±0.07

µm

typ.

Unidirectional repeatability in Z

±0.2

µm

typ.

Backlash in X, Y

0.04

µm

Backlash in Z

0.08

µm

Backlash in θX, θY

45

µrad

Backlash in θZ

25

µrad

Max. speed in X, Y

5

mm/s

Max. speed in Z

2

mm/s

Load capacity in X, Y

1

N

max.

Load capacity in Z
(base plate horizontal)

2

N

max.

Holding force in X, Y, Z, passive

3

N

Drive type

Piezoelectric inertia drive

Guide type

Crossed roller bearings

Parallel Kinematics /Hexapods

typ.

Mechanical properties

Miscellaneous
Connection

6x Sub-D 15 (m)Material

Stainless steel, aluminum

Mass without cable and connector

0.3

kg

±5 %

Cable length2m±10 mmRecommended electronics

C-886.31

81

MOTION|POSITIONING

N-865 NEXACT® SpaceFAB
6 Degrees of Freedom, Highest Precision, Low-Profile Hexapod Design

N-865.160, dimensions in mmn

Six degrees of freedomnClear aperturen

Sensor resolution 0.5 nm

n15 N load capacityn S
 elf-locking when switched off: Savesenergy and reduces generation of heatnApplicationsn Fine adjustment of the smallest

components during assemblyn Photonics / Alignment

Applications

Crossed roller guides, anti-creep>> NEXACT® Piezo walking driven Microscopy>> Parallel Kinematics, Hexapods

n Beamline systems>> PIOne Linear Encodern Semiconductor technology>> Vacuum-Compatible Versionsn Test laboratories

Technology Glossary ....................... page 148

82

W W W. P I . W S

N-865.160

Unit

Tolerance

Motion and positioning
Active axes

X, Y, Z, θX, θY, θZ

Integrated sensor

Incremental linear encoder
PIOne

Travel range* in X, Y

±6.5

Travel range* in Z

±5mm

Rotation range* in θX, θY±7°Rotation range* in θZ±8°

Sensor resolution

0.5

nm

Minimum incremental motionin X, Y

2

nm

typ.

Minimum incremental motion in Z

2

nm

typ.

Minimum incremental motion inθX, θY, θZ

0.2

µrad

typ.

Unidirectional repeatability in X

±40

nm

typ.

Unidirectional repeatability in Y

±30

nm

typ.

Unidirectional repeatability in Z

±20

nm

typ.

Unidirectional repeatability in θX

±5

µrad

typ.

Unidirectional repeatability in θY

±7

µrad

typ.

Unidirectional repeatability in θZ

±7

µrad

typ.

Backlash in X

70

nm

typ.

Backlash in Y

30

nm

typ.

Backlash in Z

20

nm

typ.

Backlash in θX

12

µrad

typ.

Backlash in θY

9

µrad

typ.

Backlash in θZ

4

µrad

typ.

Load capacity in X, Y

7.5

N

max.

Load capacity in Z
(base plate horizontal)

15

N

max.

Drive type

NEXACT® piezo walking drive±5 %Parallel Kinematics /Hexapods

mm

Mechanical properties

Miscellaneous
Connection

HD Sub-D 78 (m)Sensor connection

2x HD Sub-D 26 (f)Material

Stainless steel, aluminum

Mass

3.9

kg

Operating temperature range

10 to 50

°C

Technical data specified at 20±3 °C.
Ask about custom designs!
* The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent.
The data for each axis in this table shows its maximum travel range, where all other axes and the pivot point are at the reference position.

83

MOTION|POSITIONING

Linear Actuators

84

W W W. P I . W S

PiezoMike Actuators .................................................................................................................................................................

86

N-450 PiezoMike Miniature Linear Actuator ...................................................................	
N-470 PiezoMike Linear Actuator ...................................................................................	
N-470.V / N-470.U PiezoMike Linear Actuator .................................................................	
N-472 PiezoMike Linear Actuator ...................................................................................	
N-474 PiezoMike Linear Actuator ...................................................................................	

86
88
90
92
94

PiezoMike Mirror Mount ...........................................................................................................................................................

96

N-480 PiezoMike Miniature Linear Actuator ...................................................................	 96

Linear OEM Actuators ...............................................................................................................................................................

98

PiezoMike Actuators

N-412 Linear Actuator with Q-Motion® Piezo Motor .......................................................	 98
N-422 Linear Actuator with Q-Motion® Piezo Motor .......................................................	 100

85

MOTION|POSITIONING

N-450 PiezoMike Miniature Linear Actuator
Smallest PiezoMike on the Market for 0.5” Mirror Holders

Linear actuator with piezo inertia drive
The internal piezo actuator slowly expands when
an electric voltage is applied. This expansion leads
to rotary motion of the claw. Because the claw
clamps onto the fine-thread screw, the resulting
motion then turns the screw. When the piezo
actuator has reached its maximum expansion,
it quickly contracts and the claw returns to its
initial position. Due to rapid contraction, the claw
slides around the screw. Due to its mass inertia,
it remains in its initial position.
Alignment of mechanical and optomechanicalcomponents
Stable alignment of optical paths. Long-term
positioning stability: High stability at target position, reliable startup even after longer downtimes. Versions to 10–6 hPa available.

n

30 % smaller than the N-470

n

Feed force 14 Nn

Step size 15 nm

nLifetime >1,000,000,000 stepsnSelf-locking, no heat generation at rest

N-450, dimensions in mm

n N onmagnetic and vacuum-compatible

operating principles

Applications>> PiezoMiken Optical alignment>> Q-Motion® Piezoelectric Inertia Driven Mirror adjustment>> Vacuum-Compatible Versionsn Autofocus

Technology Glossary ....................... page 148

86

W W W. P I . W S

N-450Unit

Tolerance

Motion and positioning
Active axes

X

Travel range

7mm

Step size

15

nm

Step frequency

2

kHz

Velocity2

mm/mintyp.

Feed Force

15

N

typ.

typ.

Drive properties
Drive type

Piezoelectric inertia drive

Operating voltage

80

V

max.

Power consumption

5

W

max.

Operating temperature range

10 to 40

°C

Motor connection

LEMO 3-pin

Cable length2

Mechanical connection

M7 × 0.75

Recommended electronics

E-872; E-871.1A1N

Miscellaneous

PiezoMike Actuatorsm

87

MOTION|POSITIONING

N-470 PiezoMike Linear Actuator
Minimum Dimensions, High Forces, Stable Positioning

Linear actuator with piezo motors
Linear screw-type actuator with piezoelectric
inertia drive for high-resolution and stable positioning. Open-loop operation in full-step mode.
Piezo motors
Compact, inexpensive inertia drive (stick-slip). At
rest, the drive is self-locking, requires no current,and does not generate any heat. It holds the position with maximum force.
Alignment of mechanical and optomechanicalcomponents
Stable alignment of optical paths. Long-term positioning stability: High stability at target position,
reliable startup even after longer downtimes.
High holding force and resolution by combining piezo actuators with mechanical thread translation. Vacuum-compatible versions to 10–9 hPa
available.

nHolding force >100 N, feed force 22 Nn

Step size 20 nm

nTravel range 7.5 mm to 26 mm

nCompact designnLifetime >1,000,000,000 stepsnSelf-locking, no heat generation at rest

PiezoMike linear actuators replace manual
micrometer screws in tip / tilt mirror mechanics

Applications>> PiezoMiken Optical alignment>> Q-Motion® Piezoelectric Inertia Driven Mirror adjustment>> Vacuum-Compatible Versionsn Autofocus

Technology Glossary ....................... page 148

88

W W W. P I . W S

N-470

Unit

Motion and positioning
Active axis

X

Travel range

N-470.1xx: 7.5
N-470.2xx: 13
N-470.4xx: 26

mm

Max. step size in step mode

30

nm

Typ. step size

20

nm

Step frequency

2000

Hz

Max. velocity in full-step mode

3.6

mm/minTyp. velocity in full-step mode

2.4

mm/minMechanical properties
Mechanical interface

N-470.x1x: Mounting thread M10×1
N-470.x2x: Clamping shank 9.5 mm

Stiffness in motion direction

15.5

N/µm

Feed force (active)

22

N

Holding force (passive)

>100

N

Permissible lateral force

1

N

Drive properties
Drive type

Piezoelectric inertia drive

Max. operating voltage

80VMax. power consumption

5

W

Operating temperature range

10 to 40

°C

Material

Screw: Stainless steel
Housing: Aluminum

Dimensions

14 × 28 × 48

mm

Mass

80

g

Cable length2mCable exit

N-470.xxx: Standard
N-470.xxxY: Twisted cable exit

Connector

Mini DIN 4-pin

Recommended electronics

E-871.1A1N

Miscellaneous

PiezoMike Actuators

Ask about custom designs!

N-470 with mounting thread, dimensions in mm

A
B

N-470 with clamping shank, dimensions in mm

N-470.11x
N-470.11xY

N-470.21x
N-470.21xY

N-470.41x
N-470.21xY

48 mm
7.5 mm

54 mm
13 mm

68.5 mm
26 mm

A
B

N-470.12x
N-470.12xY

N-470.22x
N-470.22xY

N-470.42x
N-470.22xY

48 mm
7.5 mm

54 mm
13 mm

68.5 mm
26 mm

89

MOTION|POSITIONING

N-470.V / N-470.U PiezoMike Linear Actuator
Minimum Dimensions, High Forces, Stable Positioning, Vacuum to 10–9 hPanHolding force >100 N

Linear actuator with piezo motorsnStep size 20 nm

nTravel range 7.5 mm to 26 mm

nCompact design

Linear screw-type actuator with piezoelectric
inertia drive for high-resolution and stable positioning. Open-loop operation in full-step mode.

nFeed force 22 N

Piezo motorsnLifetime >1,000,000,000 steps

Compact, inexpensive inertia drive (stick-slip). At
rest, the drive is self-locking, requires no current,and does not generate any heat. It holds the position with maximum force.
Alignment of mechanical and optomechanicalcomponents
Stable alignment of optical paths. Long-term
positioning stability: High stability at target position, reliable startup even after longer downtimes. High holding force and resolution by combining piezo actuators with mechanical threadtranslation. Vacuum-compatible to 10–9 hPa.

N-470 with mounting thread, dimensions in mm

A
B

N-470 with clamping shank, dimensions in mm

N-470.11x
N-470.11xY

N-470.21x
N-470.21xY

N-470.41x
N-470.41xY

48 mm
7.5 mm

54 mm
13 mm

68.5 mm
26 mm

A
B

N-470.12x
N-470.12xY

N-470.22x
N-470.22xY

N-470.42x
N-470.42xY

48 mm
7.5 mm

54 mm
13 mm

68.5 mm
26 mm

Applications>> PiezoMiken Optical alignment>> Q-Motion® Piezoelectric Inertia Driven Mirror adjustment>> Vacuum-Compatible Versionsn Autofocus

Technology Glossary ....................... page 148

90

W W W. P I . W S

N-470.x1V
N-470.x1VY

N-470.x1U
N-470.x1UY

N-470.x2V
N-470.x2VY

N-470.x2U
N-470.x2UY

Mechanical interface

M10×1 mounting
thread

M10×1 mounting
thread

9.5 mm clampingshank

9.5 mm clamping
shank

Pressure range

10–6 hPa

10–9 hPa

10–6 hPa

10–9 hPa

N-470.11x; N-470.11xx
N-470.12x; N-470.12xx

N-470.21x; N-470.21xx
N-470.22x; N-470.22xx

N-470.41x; N-470.41xx
N-470.42x; N-470.42xx

Unit

Active axis

X

X

X

Travel range

7.5

13

26

mm

Max. step size in step mode

30

30

30

nm

Motion and positioning

Typ. step size

20

20

20

nm

Step frequency

2000

2000

2000

Hz

Max. velocity in full-step mode

3.6

3.6

3.6

mm/minTyp. velocity in full-step mode

2.4

2.4

2.4

mm/minMechanical properties
Stiffness in motion direction

15.5

15.5

15.5

N/µm

Feed force (active)

22

22

22

N

Holding force (passive)

00

>100

>100

N

Permissible lateral force

1

1

1

N

Drive type

Piezoelectric inertia drive

Piezoelectric inertia drive

Piezoelectric inertia drive

Max. operating voltage

80

80

80

V

Max. power consumption

5

5

5

W
°C

Drive properties

Operating temperature range

10 to 40

10 to 40

10 to 40

Material

Screw: Stainless steel
Housing: Stainless steel

Screw: Stainless steel
Housing: Stainless steel

Screw: Stainless steel
Housing: Stainless steel

Dimensions

14 × 28 × 48

14 × 28 × 53.5

14 × 28 × 68.5

mm

Mass

80

85

95

g

Cable length / connector

1 m in vacuum chamber,bare stranded wires;2 m outside of vacuum
chamber, exposed wires
to Mini DIN 4-pin

1 m in vacuum chamber,bare stranded wires;2 m outside of vacuum
chamber, exposed wires
to Mini DIN 4-pin

1 m in vacuum chamber,bare stranded wires;2 m outside of vacuum
chamber, exposed wires
to Mini DIN 4-pin

Recommended electronics

E-871.1A1N

E-871.1A1N

E-871.1A1N

PiezoMike Actuators

Miscellaneous

Ask about custom designs!

91

MOTION|POSITIONING

N-472 PiezoMike Linear Actuator
With Position Sensor for Closed-Loop Operation

N-472,210, dimensions in mm

N-472,110, dimensions in mm

n S
 elf-locking at rest even when closed-loop

control is switched offn C ompact design with integrated incremental

encodernHigh stability at target positionn

Reliable startup even after longer downtimesnLifetime >1,000,000,000 stepsn V acuum-compatible versions to 10

–6

hPa

available

Applications>> PiezoMiken Optical alignment>> Q-Motion® Piezoelectric Inertia Driven Mirror adjustment>> Vacuum-Compatible Versionsn Autofocus

Technology Glossary ....................... page 148

92

W W W. P I . W S

N-472.110
N-472.110Y
N-472.120
N-472.120Y

N-472.11V
N-472.11VY
N-472.12V
N-472.12VY

N-472.210
N-472.210Y
N-472.220
N-472.220Y

N-472.21V
N-472.21VY
N-472.22V
N-472.22VY

Active axis

X

X

X

X

Travel range

7.5

7.5

13

13

Integrated sensor

Incremental, optical

Incremental, optical

Incremental, optical

Incremental, optical

Unit

Motion and positioningmm

Sensor signal, analog

1

1

1

1

Reference point definition using reference
point or limit switch

–

–

–

–

Vpp

Design resolution*

0.09

0.09

0.09

0.09

nm

Minimum incremental
motion**

50

50

50

50

nm

Unidirectional
repeatability**

200

200

200

200

nm

Linearity error***

2

2

2

2

µm

Typical velocity****

2

2

2

2

mm/minOperating frequency

2000

2000

2000

2000

Hz

Maximum permissible
operating frequency
during continuous
operation

400

200

400

200

Hz

M10×1 mounting
thread (N 472.11V;
N 472.11VY)
9.5 mm clamping
shank (N 472.12V;
N 472.12VY)

M10×1 mounting
thread (N 472.210;
N 472.210Y)
9.5 mm clamping
shank (N 472.220;
N 472.220Y)

M10×1 mounting
thread (N 472.21V;
N 472.21VY)
9.5 mm clamping
shank (N 472.22V;
N 472.22VY)

Holding force, power off

M10×1 mounting
thread (N 472.110;
N 472.110Y)
9.5 mm clamping
shank (N 472.120;
N 472.120Y)
>100

>100

>100

>100

N

Feed Force

22

22

22

22

N

Drive type

Piezoelectric
inertia drive

Piezoelectric
inertia drive

Piezoelectric
inertia drive

Piezoelectric
inertia drive

Maximum operating
voltage

80

80

80

80

V

Operating temperature
range

10 to 40

10 to 40

10 to 40

10 to 40

°C

Vacuum operation–

To 10–6 hPa–

To 10–6 hPa

Material

Screw:
Stainless steel
Housing:
Aluminum, bronze

Screw:
Stainless steel
Housing:
Stainless steel,bronzeScrew:
Stainless steel
Housing:
Aluminum,bronzeScrew:
Stainless steel
Housing:
Stainless steel,bronzeWeight

200

250

210

260

Cable length2m

1 m inside thevacuum, barestranded wires;2 m outside thevacuum, barestranded wires
to Sub-D 15

2m

1 m inside thevacuum, barestranded wires;2 m outside thevacuum, barestranded wires
to Sub-D 15

Motor / sensor
connection

Sub-D 15 (m)Sub-D 15 (m)Sub-D 15 (m)Sub-D 15 (m)Recommended
electronics

E-871.1A1N

E-871.1A1N

E-871.1A1N

E-871.1A1N

Mechanical properties
Mechanical interface

PiezoMike Actuators

Drive properties

Miscellaneousg*With E-871 motion controller** 20 N preload, measured at 100 µm stroke, compensated for temperature drift*** 20 N preload, measured over the entire stroke, compensated for temperature drift**** Not suitable for continuous operation
Ask about custom designs!

93

MOTION|POSITIONING

N-474 PiezoMike Linear Actuator
Strongest PiezoMike on the Market, Small Dimensions, Stable Positioningn

Feed force 40 Nn

Step size 20 nm

nLifetime >1,000,000,000 stepsnSelf-locking, no heat generation at restn N onmagnetic and vacuum-compatible

operating principle

Linear actuator with piezo inertia drive
The internal piezo actuator slowly expands when
an electric voltage is applied. This expansion
leads to rotary motion of the claw. Because theclaw clamps onto the fine-thread screw, the resulting motion then turns the screw. When thepiezo actuator has reached its maximum expansion, it quickly contracts and the claw returns to
its initial position. Due to rapid contraction, theclaw slides around the screw. Due to its massinertia, it remains in its initial position.

N-474, dimensions in mm

Alignment of mechanical and optomechanicalcomponents
Stable alignment of optical paths. Long-term positioning stability: High stability at target position,
reliable startup even after longer downtimes.
Versions to 10–6 hPa available as N-474.xxVx.

Applications>> PiezoMiken Optical alignment>> Q-Motion® Piezoelectric Inertia Driven Mirror adjustment>> Vacuum-Compatible Versionsn Autofocus

Technology Glossary ....................... page 148

94

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N-474

Unit

Tolerance

Motion and positioning
Active axes

X

Travel range

13

Step size

20

mm
nm

Step frequency

2

kHz

typ.

Velocity

2

mm/s

typ.

Feed Force

40

N

typ.

Drive properties
Drive type

Piezoelectric inertia drive

Operating voltage

80

V

max.

Power consumption

5

W

max.

Operating temperature range

10 to 40

°C

Motor connection

LEMO 3-pin

Miscellaneous

Cable length2

Mechanical connection

9.5 mm clamping shank (N-474.x2xx)
or M10 mounting thread (N-474.x1xx)

m

Recommended electronics

E-871.1A1N

PiezoMike Actuators

Technical data specified at 22 ±3 °C with E-872.401.
Ask about custom designs!

95

MOTION|POSITIONING

N-480 PiezoMike Miniature Linear Actuator
With Kinematic Mirror Mount

Kinematic mirror mounts with piezo motors
Linear screw-type actuator with piezoelectric
inertia drive for high-resolution and stable positioning.
Piezo motors
Compact, inexpensive inertia drive principle(stick-slip). At rest, the drive is self-locking, requires no current, and does not generate any
heat. It holds the position with maximum force.
Alignment of optical components
Stable alignment of optical paths. Long-term
positioning stability: High stability at target
position, reliable startup even after longer downtimes. High holding force and resolution by
combining piezo actuators with mechanicalthread translation. Vacuum-compatible versions
to 10–9 hPa available.

nHigh stabilitynFor optics with 0.5ʺ, 1ʺ or 2ʺ diametern C ompact design with integrated incremental encodern

Step size 1 µradnLifetime >1.000.000.000 stepsn V acuum-compatible versions to 10–9N-480.210L0, PiezoMike mirror holder,right-hand framehPa available

N-480.210R0, PiezoMike mirror holder,
left-hand frame

N-480.210RU, PiezoMike mirror holder
for ultrahigh vacuum

Applications>> PiezoMiken Optical alignment>> Q-Motion® Piezoelectric Inertia Driven Mirror adjustment>> Vacuum-Compatible Versions
Technology Glossary ....................... page 148

96

W W W. P I . W S

Unit

N-480.205C0;
N-480.205CV /N-480.205CU

N-480.210C0;
N-480.210CV /N-480.210CU

N-480.210L0;
N-480.210LV /N-480.210LU

N-480.210R0;
N-480.210RV /N-480.210RU

Mechanicalinterface

0,5ʺ optics, closedframe
V: Vacuum to 10–6 hPa
U: Vacuum to 10–9 hPa

1ʺ optics, closedframe
V: Vacuum to 10–6 hPa
U: Vacuum to 10–9 hPa

1ʺ optics, right-hand
V: Vacuum to 10–6 hPa
U: Vacuum to 10–9 hPa

1ʺ optics, left-hand
V: Vacuum to 10–6 hPa
U: Vacuum to 10–9 hPa

Holding force,
power off

>100

>100

>100

>100

N

Feed force (active)

22

22

22

22

N

Mechanicalproperties

N-480.x05x, N-480.x10x

Unit

Motion andpositioning
Active axis

θX, θY

Tip / tilt angle±8°

Step size1µradN-480.220C0; N-480.220CV /N-480.220CU

N-480.220L0; N-480.220LV /N-480.220LU

N-480.220R0; N-480.220RV /N-480.220RU

Unit

Mechanicalinterface2ʺ optics, closed frame
V: Vacuum to 10–6 hPa
U: Vacuum to 10–9 hPa

2ʺ optics, right-hand
V: Vacuum to 10–6 hPa
U: Vacuum to 10–9 hPa

2ʺ optics, left-hand
V: Vacuum to 10–6 hPa
U: Vacuum to 10–9 hPa

Holding force,
power off

>100

>100

>100

N

Feed force (active)

22

22

22

N

N-480.x20x

PiezoMike Actuators

Mechanicalproperties

Unit

Motion andpositioning
Active axis

θX, θY

Tip / tilt angle±4°

Step size

0.5

µrad

N-480

Unit

Drive properties
Drive type

Piezoelectric inertia drive

Motor voltage

80

V

Operatingtemperature

10 to 40

°C

Material

Screw: Stainless steel
Holder: Aluminum

Cable length2

Connector

LEMO type 0S, 3-pin

Recommended
controller

E-872.401

Miscellaneousm

Ask about custom designs!

97

MOTION|POSITIONING

N-412 Linear Actuatorwith Q-Motion® Piezo Motor
Inexpensive and Easy to Integrate OEM Actuatorn

OEM actuator without position sensornSilent: Operating frequency to >20 kHzn

Velocity over 5 mm/sn

Submicron resolutionnHolding force to 10 Nn

Low operating voltage to 48 VppnSelf-locking, no heat generation at rest

N-412.50, dimensions in mm

N-412.51, dimensions in mm

Applications>> Extensive Software Packagen Optical alignment>> Q-Motion® Piezoelectric Inertia Driven Mirror adjustmentn Autofocus

Technology Glossary ....................... page 148

98

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N-412.50

N-412.51

Unit

Tolerance

Active axis

X

X

Travel range

13

13

mm

Step size (in step mode)

300

300

nm

typ.

Step frequency*

23

23

kHz

max.

Max. velocity*

5

5

mm/s

min.

Linear actuator, 9.5 mm clampingshankLinear actuator, M10x1 thread

MotionMechanical properties
Mechanical interface
Stiffness in motion direction

>4

>4

N/µm

±20 %

Push / pull force (active)

7

7

N

max.

Max. holding force (passive)

10

10

N

min.

Drive type

Piezoelectric inertia drive

Piezoelectric inertia drive

Operating voltage

48

48

Vpp

max.

Operating temperature range

0 to 50

0 to 50°C

Material**

Stainless steel

Stainless steel

Dimensions

58 mm length, 15 mm diameter

58 mm length, 15 mm diameter

Mass

25

25

g

±5 %

Cable length

1.5

1.5

m

±10 mmConnector

DIN 4-pin

DIN 4-pin

Recommended electronics

E-871.1A1N

E-871.1A1N

Drive properties

Miscellaneous

PiezoMike Actuators

Ask about custom designs!
* Depending on the driver electronics.
** Ceramic rod.

99

MOTION|POSITIONING

N-422 Linear Actuatorwith Q-Motion® Piezo Motor
Inexpensive and Easy-to-Integrate OEM Actuatorn

OEM actuator without position sensornEasy integration: Two mounting versionsnSilent: Operating frequency to >20 kHzn

Velocity over 5 mm/sn

Submicron resolutionnHolding force to 10 N

N-422, dimensions in mm

Applications>> Extensive Software Packagen Optical alignment>> Q-Motion® Piezoelectric Inertia Driven Mirror adjustmentn Autofocus

Technology Glossary ....................... page 148

100

W W W. P I . W S

N-422.50

Unit

Tolerance

MotionActive axes

X

Travel range

35

mm

Step size (in step mode)

300

nm

typ.

Step frequency*

20

kHz

max.

Max. velocity*

5

mm/s

min.

Stiffness in motion direction

>4

N/µm

±20 %

Push / pull force (active)

7

N

max.

Max. holding force (passive)

10

N

min.

Mechanical properties

Drive properties
Drive type

Piezo inertia drive

Operating voltage

48

Vpp

max.

Power consumption

15 (actuator)
30 (driver input)

W

nominalOperating temperature range

0 to 50°C

Material**

Stainless steel

Dimensions

21.5 × 18 × 13 + runner

mm

Mass

25

g

±5 %

Cable length

1.5m±10 mmConnector

DIN 4-pin

Recommended electronics

E-871.1A1N

Miscellaneous

PiezoMike Actuators

Ask about custom designs!
* Depending on drive electronics.
** Ceramic runner.

101

MOTION|POSITIONING

Motion Control

102

W W W. P I . W S

PILine® Motion Controllers ....................................................................................................................................................... 104
C-867.1U PILine® Motion Controller ................................................................................	 104
C-867.2U2 PILine® Motion Controller ..............................................................................	 106
C-877.1U11 PILine® Motion Controller ............................................................................	 108
C-877.2U12 PILine® Motion Controller ............................................................................	 110

Q-Motion Controllers ................................................................................................................................................................ 112
E-873 Q-Motion® Digital Servo Controller, 1 Axis ...........................................................	 112
E-873.3QTU Q-Motion® Digital Servo Controller, 3 Axes ................................................	 114

Modular Multi-Channel Controllers .......................................................................................................................................... 116
C-885 PIMotionMaster ....................................................................................................	 116
C-867.1xC885 PILine® Controller Module ........................................................................	 118
E-873.10C885 Q-Motion® Controller Module for C-885 PIMotionMaster .........................	 120

Q-Motion Hexapod Controller .................................................................................................................................................. 122
C-886.31 Parallel Kinematics Controller ..........................................................................	 122

PiezoMike Controller ................................................................................................................................................................ 124
E-871.1A1N PiezoMike – Q-Motion® Controller ...............................................................	 124

Drive Electronics ....................................................................................................................................................................... 126

Motion Control

E-872.401 Q-Motion® Piezo Motor / PiezoMike Drive Electronics ....................................	 126
E-872 Q-Motion® Piezomotor Driver Electronics, OEM Board .........................................	 128

103

MOTION|POSITIONING

C-867.1U PILine® Motion Controller
For Single-Axis Positioning Stages with PILine® Ultrasonic Piezo Motorn I ntegrated power amplifier with dynamic

frequency control
n M
 ultifunctional encoder input: A/B,

sin / cos, BiSSn M
 acro programmable for stand-alonefunctionalityn I ntegrated Interfaces: USB, RS-232,

SPI, I/O, joystickn D aisy chain networking of up to 16 units

C-867.1U, dimensions in mm>> Extensive Software Package>> PILine® Ultrasonic Piezomotors
Technology Glossary ....................... page 148

104

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C-867.1U
FunctionController for single-axis positioning stages

Drive types

Performance class 1 and 2 PILine® motors

Axes

1

Motion and control
Controller type

Programmable PID control, parameter changing during operation

Motion profiles

Point-to-point trapeze, user-definable trajectories

Encoder input

Sin / cos (differential), A/B (TTL, differential), BiSS interface

Stall detection

Servo off, triggered by programmable position error or power level

Limit switches

2 programmable TTL lines per axis

Reference point switch

1 programmable TTL line per axis

Electrical properties
Max. output power per axis

15 W

Max. output voltage per axis

200 Vpp

Interfaces and operation
Communication interfaces

USB, RS-232, SPI

Motor connection

Sub-D 15 (f)Controller network

Up to 16 units on a single interface

I/O lines

4 analog / digital inputs
4 digital outputs to mini DIN, 9-pin
Digital: TTL
Analog: 0 to 5 V

Command set

PI General Command Set (GCS)

User software

PIMikroMove

Application programming interfaces

API for C / C++ / C# / VB.NET / MATLAB / Python, drivers for NI LabVIEW

Supported functions

Startup macro. Data recorder for recording operating data such as motor voltage,velocity, position or position error. ID chip detection.

Manual control

Pushbutton box, analog joystick

Miscellaneous
Operating voltage

24 V DC (external power adapter in the scope of delivery)

Max. current consumption

300 mA plus motor current (max. 2 A)

Operating temperature range

5 to 40 °C

Mass

1 kg

Dimensions

205 mm × 130 mm × 55.2 mm (incl. mounting rails)

Motion Control

Ask about custom designs!

Accessories
C-862.CN
C-862.CN1
C-862.CN2
C-170.PB
C-170.IO
C-819.20
C-819.20Y
C-819.30
C-819.JA

Network cable for daisy chain network, 30 cm
Network cable for daisy chain network, 1 m
Network cable for daisy chain network, 3 m
Pushbutton box with 4 buttons and 4 LEDs
I/O cable, 2 m, open end
Analog joystick for 2 axes
Y cable for connecting 2 controllers to a joystick C-819.20
Analog joystick for 3 axes
Analog joystick for 2 axes, 3 programmable buttons

105

MOTION|POSITIONING

C-867.2U2 PILine® Motion Controller
For Two-Axis Positioning Stages with PILine® Ultrasonic Piezo Motors

n I ntegrated power amplifier with dynamic frequency control
n M
 ultifunctional encoder input: A/B, sin / cos, BiSSn M
 acro programmable for stand-alone functionalityn I ntegrated interfaces: USB, RS-232, TCP/IP, SPI, I/O, joystickn D aisy chain networking of up to 16 unitsn T rajectory support for 1- or 2-D motion patternsnIncluded in U-780 System for Microscopy

C-867.2U2, dimensions in mm>> Extensive Software Package>> PILine® Ultrasonic Piezomotors
Technology Glossary ....................... page 148

106

W W W. P I . W S

C-867.2U2
FunctionController for XY positioning, scanning or microscope stages

Drive types

Performance class 1 and 2 PILine® motors

Axes

2

Motion and control
Controller type

Programmable PID control, parameter changing during operation

Motion profiles

Point-to-point trapeze, user-definable trajectories

Encoder input

Sin / cos (differential), A/B (TTL, differential), BiSS interface

Stall detection

Servo off, triggered by programmable position error or power level

Limit switches

2 programmable TTL lines per axis

Reference point switch

1 programmable TTL line per axis

Electrical properties
Max. output power per axis

15 W

Max. output voltage per axis

200 Vpp

Interfaces and operation
Communication interfaces

USB, RS-232, TCP/IP, SPI

Motor connection

Sub-D 15 (f)Controller network

Up to 16 units on a single interface

I/O lines

4 analog / digital inputs
4 digital outputs to mini DIN, 9-pin
Digital: TTL
Analog: 0 to 5 V

Command set

PI General Command Set (GCS)

User software

PIMikroMove

Application programming interfaces

API for C / C++ / C# / VB.NET / MATLAB / Python, drivers for NI LabVIEW

Supported functions

Startup macro. Data recorder for recording operating data such as motor voltage,velocity, position or position error. ID chip detection.

Manual control

Pushbutton box, analog or digital joystick (for 2 axes)

Miscellaneous
Operating voltage

24 V DC (external power adapter in the scope of delivery)

Max. current consumption

600 mA plus motor current (max. 4 A)

Operating temperature range

5 to 40 °C

Mass

1.62 kg

Dimensions

312 mm × 153.4 mm × 59.3 mm (incl. mounting rails)

Motion Control

Ask about custom designs!

Accessories
C-862.CN
C-862.CN1
C-862.CN2
C-815.553
C-815.563
C-815.34
C-170.PB
C-170.IO
C-819.20
C-819.30
C-819.JA
C-819.JD

Network cable for daisy chain network, 30 cm
Network cable for daisy chain network, 1 m
Network cable for daisy chain network, 3 m
Patch cable 1:1, for connecting controller and PC via a TCP/IP network
Patch cable twisted, for connecting controller and PC directly via TCP/IP
RS-232 null modem cable, 3 m, 9/9-pin
Pushbutton box with 4 buttons and 4 LEDs
I/O cable, 2 m, open end
Analog joystick for 2 axes
Analog joystick for 3 axes
Analog joystick for 2 axes, 3 programmable buttons
Digital joystick for 2 axes, 3 programmable buttons

107

MOTION|POSITIONING

C-877.1U11 PILine® Motion Controller
For Ultrasonic Piezo Motors, 1 Axis, Inexpensive and CompactnIntegrated power amplifiern P
 ID servo control with dynamic parameterswitchingn M acro programmable for stand-alonefunctionality
C-877.1U11, dimensions in mmnData recordern E xtensive software support, e.g., for

NI LabVIEW, C, C++, MATLAB, Python>> Extensive Software Package>> PILine® Ultrasonic Piezomotors
Technology Glossary ....................... page 148

108

W W W. P I . W S

C-877.1U11
FunctionController for positioners or scanning stages with PILine® class 1 ultrasonicpiezo motors

Axes

1

Motion and control
Controller type

PID controller, parameter changing during operation

Servo cycle time

100 µsProfile generator

Point-to-point motion. Trapezoidal velocity profile.

Encoder input

A/B quadrature TTL level, differential according to RS-422

Stall detection

Automatic motor stop when a programmable position error is exceeded

Limit switches

2 × TTL (programmable polarity)

Reference point switch

1 × TTL

Electrical properties
Max. output power per axis

15 W

Max. output voltage per axis

200 Vpp, 71 Veff

Interfaces and operation
Communication interfaces

USB

Motor / sensor connection

Sub-D 15 (f)Command set

PI General Command Set (GCS)

User software

PIMikroMove

Application programming interfaces

API for C / C++ / C# / VB.NET / MATLAB / Python, drivers for NI LabVIEW

Supported functions

Startup macro. Data recorder for recording operating data such as motor voltage,velocity, position or position error. Internal safety circuitry: Watchdog timer.
ID chip detection

Miscellaneous
Operating voltage

24 V DC from external power adapter (in the scope of delivery)

Max. current consumption

300 mA plus motor current (max. 0.8 A)

Operating temperature range

5 to 40 °C

Mass

0.13 kg

Dimensions

95 mm × 71 mm × 24 mm (incl. mounting rails)

Motion Control

Ask about custom designs!

109

MOTION|POSITIONING

C-877.2U12 PILine® Motion Controller
For Ultrasonic Piezo Motors, 2 Axes, Inexpensive and Compactn I ntegrated power amplifiern P
 ID servo control with dynamic parameter switchingn M acro programmable for stand-alone functionalitynData recordernDaisy chain networking of up to 16 unitsn E
 xtensive software support, e.g., for NI LabVIEW, C, C++, MATLAB, Python

C-877.2U12, dimensions in mm>> Extensive Software Package>> PILine® Ultrasonic Piezomotors
Technology Glossary ....................... page 148

110

W W W. P I . W S

C-877.2U12
FunctionController for positioning or scanning stages with performance class 1 and 2
PILine® ultrasonic piezo motors

Axes

2

Motion and control
Controller type

PID controller, parameter changing during operation

Servo cycle time

100 µsProfile generator

Point-to-point motion. Trapezoidal velocity profile.

Encoder input

A/B quadrature TTL level, differential according to RS-422

Stall detection

Automatic motor stop when a programmable position error is exceeded

Limit switches

2 × TTL (programmable polarity)

Reference point switch

1 × TTL

Electrical properties
Max. output power per axis

24 W

Max. output voltage per axis

200 Vpp, 71 Veff

Interfaces and operation
Communication interfaces

USB; RS-232

Motor / sensor connection

2 x Sub-D 15 (f)Controller network

Up to 16 units on a single interface

I/O lines

4 digital inputs (5 V TTL), 4 digital outputs (5 V TTL)

Command set

PI General Command Set (GCS)

User software

PIMikroMove

Application programming interfaces

API for C / C++ / C# / VB.NET / MATLAB / Python, drivers for NI LabVIEW

Supported functions

Startup macro. Data recorder for recording operating data such as motor voltage,velocity, position or position error. Internal safety circuitry: Watchdog timer.
ID chip detection.

Miscellaneous
Operating voltage

24 V DC from external power adapter (in the scope of delivery)

Max. current consumption

600 mA plus motor current (max. 4 A)

Operating temperature range

5 to 40 °C

Mass

1.62 kg

Dimensions

312 mm × 104.7 mm × 59.5 mm (incl. mounting rails)

Motion Control

Ask about custom designs!

Accessories
C-862.CN
C-862.CN1
C-862.CN2
C-170.PB
C-170.IO

Network cable for daisy chain network, 30 cm
Network cable for daisy chain network, 1 m
Network cable for daisy chain network, 3 m
Pushbutton box with 4 buttons and 4 LEDs
I/O cable, 2 m, open end

111

MOTION|POSITIONING

E-873 Q-Motion® Digital Servo Controller, 1 Axis
For Piezoelectric Inertia Drives, TCP/IP, USB, RS-232 Interfacesn A ctuator mode for nanometer precision

positioning at the target positionn B roadband encoder inputn M acro programmable for stand-alonefunctionalityn F ast startup due to ID chip detectionn D ata recordernDigital I/O ports (TTL)n J
 oystick for manual operation

E-873, dimensions in mm. SPI, TCP/IP, RS-232 only available on E-873.1AT

E-873.1A1, dimensions in mm>> Extensive Software Package>> Q-Motion® Piezoelectric Inertia Drive
Technology Glossary ....................... page 148

112

W W W. P I . W S

E-873.1A1 - E-873.1AR - E-873.1AT
Function

Q-Motion® controller for positioning systems with piezo inertia drives, benchtop
device (E-873.1A1) or benchtop device with option for control cabinet mounting(E-873.1AR/E-873.1AT)

Axes

1

Supported functions

Startup macro. Data recorder for recording operating data such as motor voltage, velocity,
position or position error. Internal safety circuitry: Watchdog timer. ID chip detection.

Motion and control
Controller type

PID controller, parameter changing during operation

Servo cycle time

50 µs

Dynamics profile

Trapezoidal velocity profile. Point-to-point motion

Encoder input

Analog encoder inputs sine-cosine, interpolation selectable to 20000;
Interpolation electronics preset for differential transmission,
1 Vpp and 2.5 V encoder offset signal; BiSS interface for absolute encoders

Stall detection

Automatic servo off

Input limit switch

2 × TTL (pull-up / pull-down, programmable)

Input reference point switch

1 × TTL for integrated reference in the encoder

Electrical properties
Max. output power

30 W

Output voltage

0 to 100 V, drive-dependent selection

Interfaces and operation
Communication interfacesUSB
E-873.1A1, E-873.1AT additionally: TCP/IP, RS-232

Motor / sensor connection

Sub-D 15 (f)I/O lines

4 analog / digital inputs, 4 digital outputs

Command set

PI General Command Set (GCS)

User software

PIMikroMove

Application programming interfaces

API for C / C++ / C# / VB.NET / MATLAB / Python, drivers for NI LabVIEW

Manual control (optional)

Joystick

Operating voltage

24 V DC from external power supply (included in the scope of delivery)

Max. current consumption

1.5 A

Operating temperature range

0 to 50 °C

Mass

E-873.1AR: 0.3 kg
E-873.1AT: 0.335 kg
E-873.1A1: 1.07 kg

Dimensions

E-873.1A1: 120 mm x 170 mm x 53.4 mm
E-873.1AR, E-873.1AT: 137 mm x 105 mm x 43.82 mm

Motion Control

Miscellaneous

Ask about custom designs!

113

MOTION|POSITIONING

E-873.3QTU
Q-Motion® Digital Servo Controller, 3 Axes
For Piezoelectric Inertia Drives, TCP/IP, USB Interfaces

Digital servo controller for piezo inertia drivesn A ctuator mode for nanometer precision

Integrated power amplifier and voltage generator for piezo inertia drives. Pointto-point motion, trapezoidal velocity profile, actuator mode for nanometer precision positioning at the target position. 3 axes.

n B roadband encoder input

positioning at the target positionn M acro programmable for stand-alonefunctionality

Encoder inputs
Differential signal transmission for analog (sin / cos) encoder signals. Input for
TTL signals for reference point switches.

n F ast startup due to ID chip detectionn D ata recordern D
 igital I/O ports (TTL)

Interfacesn D
 igital joystick for manual operation

USB and TCP/IP for commanding. I/O lines (digital) for automation. Connection
for digital joystick.
Extensive functions, software support
Powerful macro command language. Nonvolatile macro storage, e.g., forstand-alone operation with autostart macro. Data recorder. ID chip detection
for fast startup. PID controller, parameter changing during operation. Extensive
software support, e.g., for NI LabVIEW, C, C++, MATLAB, Python. PIMikroMove
user software.

>> Extensive Software Package>> Q-Motion® Piezoelectric Inertia Drive
Technology Glossary ....................... page 148

114

W W W. P I . W S

E-873.3QTU
Function

Q-Motion® controller for positioning systems with piezo inertia drives,
benchtop device with option for control cabinet mounting

Axes

3

Supported functions

Point-to-point motion. Startup macro. Data recorder for recording operating
data such as motor voltage, position or position error. Internal safety circuitry:
Watchdog timer. ID chip detection.

Motion and control
Controller type

PID controller, parameter changing during operation

Encoder input

Analog encoder inputs sine-cosine, interpolation selectable to 20000; Interpolationelectronics preset for differential transmission, 1 Vpp and 2.5 V offset of the encoder signal

Stall detection

Automatic servo off

Input reference point switch

1 × TTL for integrated reference in the encoder

Electrical properties
Max. output power

30 W per axis

Output voltage

0 to 100 V, drive-dependent selection

Interfaces and operation
Communication interfaces

TCP/IP, USB

Motor / sensor connection

3 × Sub-D 15 (f)I/O lines

4 digital inputs, 4 digital outputs

Command set

PI General Command Set (GCS)

User software

PIMikroMove

Application programming interfaces

API for C / C++ / C# / VB.NET / MATLAB / Python, drivers for NI LabVIEW

Manual control (optional)

USB joystick

Miscellaneous
Operating voltage

24 V from external power supply (included in the scope of delivery)

Max. current consumption

5A

Operating temperature range

0 to 50 °C

Mass

1.7 kgDimensions

312 mm x 153.4 mm x 59.2 mm (incl. mounting rails)

Motion Control

Ask about custom designs!

115

MOTION|POSITIONING

C-885 PIMotionMasterRack with Processor and Interface Module for Modular Multi-Axis Controller SystemnEasy configuration and startup

Easy to expandnModular design for versatile expansionnEfficient communication with the controller modulesnGreatly reduced wiring effortn

Saves space and costs

The system is easily scalable. An additional controller module
can be inserted into any free slot and expands the overall systemby the corresponding functions. Optional digital inputs and outputs can be installed for every controller module.
Controller modules

Easy installationnC-863.20C885 DC Motor Controller Module, 2 Axes

Plug-and-play installation of the controller modules in the C-885
PIMotionMaster. The processor and interface module communicates with the PIMikroMove software and with the controller
modules. It detects the available controller module type automatically. Grouping the controller modules in one housing ensuresinternal communication and reduces the wiring effort becauseof the common power supply and external communication via asingle USB or Ethernet interface.

nC-867.1xC885 PILine® Controller ModulenE-861.11C885 NEXACT® Controller Modulen E
 -873.10C885 Q-Motion®

Controller Modulen C -663.12C885 Mercury Step Stepper Motor Controller

Modulen C
 -891.10C885 PIMag®

Controller Module>> Extensive Software Package
Technology Glossary ....................... page 290

116

W W W. P I . W S

C-885.R1

C-885.R2

C-885.R3

Function9.5” chassis for C-885
PIMotionMaster19” chassis for C-885
PIMotionMaster19” chassis for C-885
PIMotionMaster

Number of card slots

1 C-885.Mx module (required)
4 controller modules (max.)

1 C-885.Mx module (required)
20 controller modules (max.)

1 C-885.Mx module (required)
19 controller modules (max.)Dimensions

269.04 mm × 133.14 mm ×349.5 mm (incl. handles)

Without modules:
482.6 mm × 132.55 mm ×265.3 mm

Without modules:
482.6 mm × 132.55 mm ×265.3 mmWith modules:
482.6 mm × 132.55 mm ×278.55 mm

With modules:
482.6 mm × 132.55 mm ×278.55 mm

24 V DC from external power
supply24 V DC from external power
supplyOperating voltage

24 V DC from external power
supplyalso optional:
48 V DC from external power
supplySupply voltage for controller
modules

24 V DC

24 V DC

24 V DC / 48 V DC

Current consumption, max.

32 A

32 A

32 A

Mass without modules

3.2 kg

2.9 kg5.08 kg

Operating temperature range

10 to 40 °C

10 to 40 °C

10 to 40 °C

C-885.M2

Function

Digital Processor and Interface Module
for C-885 PIMotionMaster

Digital Processor and Interface Module
for C-885 PIMotionMaster, supports coupledmulti-axis operation

Communication interfaces

Ethernet, USB

Ethernet, USB

Command set

PI General Command Set (GCS)PI General Command Set (GCS)

User software

PIMikroMove

PIMikroMove

Application programming
interfaces

API for C / C++ / C# / VB.NET / MATLAB /Python, drivers for NI LabVIEW

API for C / C++ / C# / VB.NET / MATLAB /Python, drivers for NI LabVIEW

Indicators

LEDs for Power, Error

LEDs for Power, Error

Operating temperature range

10 to 40°C

10 to 40°C

Mass

132 g

270 g

Dimensions

186.42 mm × 128.4 mm (3 RU) × 19.98 mm(4 HP)

186.42 mm × 128.4 mm (3 RU) × 19.98 mm(4 HP)
Motion Control

C-885.M1

Ask about custom designs!

117

MOTION|POSITIONING

C-867.1xC885 PILine® Controller Module
For C-885 PIMotionMaster Modular Controller SystemnIntegrated power amplifier with dynamic
frequency control

n P
 ID servo control with dynamic para-

meter switchingn 5
 0 MHz encoder inputs for simultaneous

high velocity and resolutionn

BiSS interfacenData recordern P owerful macro programming language,

e.g. for stand-alone operation

Servo controller and power amplifier
Special PID controller for ultrasonic piezo motors. Power amplifier for
PILine® ultrasonic piezo motors with performance class 1, 2, and higher.
Dynamic frequency control for optimum control.
Encoder inputs
Differential signal transmission for digital (A/B) encoder signals. BiSS
interface support for absolute encoders. TTL inputs for limit and reference point switches.

C-867.11C885 Motion controller module for performanceclass 3 PILine® piezo motor systems

Plug-and-play installation in the C-885 PIMotionMasterCan be inserted in any free slot. Automatic detection and external communication (USB, Ethernet) by the processor and interface module of
the C-885. Can be expanded with optional digital inputs and outputs.
Power via the power supply of the C-885.
>> Extensive Software Package>> PILine® Ultrasonic Piezomotors
Technology Glossary ....................... page 148

118

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C-867.10C885

C-867.11C885

Controller for single-axis positioning or
scanning stages, for C-885 PIMotionMastermodular multi-axis controller system

Controller for single-axis positioning or
scanning stages, for C-885 PIMotionMastermodular multi-axis controller system

Drive types

Performance class 1 and 2 PILine® motors

Performance class 3 PILine® motors

Channels

1

1

Controller type

Programmable PID control, parameterchanging during operation

Programmable PID control, parameterchanging during operation

Motion profiles

Point-to-point, user-definable trajectories

Point-to-point, user-definable trajectories

Encoder input

Sin / cos (differential), A/B (TTL, differential),
BiSS interface

Sin / cos (differential), A/B (TTL, differential),
BiSS interface

Stall detection

Servo off, triggered by programmable
position error or power level

Servo off, triggered by programmable
position error or power level

Motion and control

Electrical properties
Max. output power

21 W

50 W

Max. output voltage

200 Vpp

400 VppCommunication interfaces

USB or Ethernet, via C-885.M1 / C-885.M2
Digital Processor and Interface Module

USB or Ethernet, via C-885.M1 / C-885.M2
Digital Processor and Interface Module

Motor connection

Sub-D 15 (f)Sub-D 15 (f)I/O lines

Optional with C-885.iD Digital Interface
Module for PIMotionMaster: 4 analog/digital
inputs (0 to 5V/TTL), 4 digital outputs (TTL)

Optional with C-885.iD Digital Interface
Module for PIMotionMaster: 4 analog/digital
inputs (0 to 5V/TTL), 4 digital outputs (TTL)

Command set

PI General Command Set (GCS)PI General Command Set (GCS)

User software

PIMikroMove

PIMikroMove

Application programming interfaces

API for C / C++ / C# / VB.NET / MATLAB /Python, drivers for NI LabVIEW

API for C / C++ / C# / VB.NET / MATLAB /Python, drivers for NI LabVIEW

Supported functions

Startup macro. Data recorder for recording
operating data such as motor voltage,velocity, position or position error.

Startup macro. Data recorder for recording
operating data such as motor voltage,velocity, position or position error.

Operating voltage, supply via C-885

24 V DC

24 V DC

Max. current consumption

300 mA plus motor current (max. 2 A)

300 mA plus motor current (max. 4 A)

Operating temperature range

10 to 40 °C

10 to 40 °C

Mass

172 g

227 g

Dimensions

186.42 mm × 128.4 mm (3 RU) ×
19.98 mm (4 HP)

186.42 mm × 128.4 mm (3 RU) ×
19.98 mm (4 HP)

Interfaces and operation

Motion Control

Miscellaneous

119

MOTION|POSITIONING

E-873.10C885 Q-Motion®
Controller Module for C-885 PIMotionMaster
For Piezoelectric Inertia Drives, 1 Axisn B
 roadband encoder inputn M acro programmable for stand-alonefunctionalitynFast startup due to ID chip detectionnData recordern P
 ID controller, parameter changing

during operation

Digital servo controller for piezo inertia drives
Integrated power amplifier and voltage generator for piezo inertia drives. Pointto-point motion, trapezoidal velocity profile, actuator mode for nanometer precision positioning at the target position. 1 axis.
Encoder input
Differential signal transmission for digital (A/B) or analog (sin / cos) encoder
signals, BiSS interface for absolute encoders.

Plug-and-play installation in the C-885
PIMotionMasterCan be inserted in any free slot. Automatic detection and external communication (USB, Ethernet)
by the processor and interface module of the
C-885. Can be expanded with optional digital
inputs and outputs. Power via the power supply of
the C-885.

Extensive functions, software support
Powerful macro command language. Nonvolatile macro storage, e.g., forstand-alone operation with autostart macro. Data recorder. ID chip detection
for fast startup. PID controller, parameter changing during operation. Extensive
software support, e.g., for NI LabVIEW, C, C++, MATLAB, Python. PIMikroMove
user software.

>> Extensive Software Package>> Q-Motion® Piezoelectric Inertia Drive
Technology Glossary ....................... page 148

120

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E-873.10C885
Function

Q-Motion® controller module for positioning systems with piezo inertia drives,
for C-885 PIMotionMaster modular multi-axis controller system

Axes

1

Supported functions

Point-to-point motion. Startup macro. Data recorder for recording operating data such as
motor voltage, velocity, position or position error. Internal safety circuitry: Watchdog timer.
ID chip detection.

Motion and control
Controller type

PID controller, parameter changing during operation

Encoder input

Analog encoder inputs sine-cosine, interpolation selectable to 20000;
Interpolation electronics preset for differential transmission,
1 Vpp and 2.5 V encoder offset signal; BiSS interface for absolute encoders

Stall detection

Automatic servo off

Input limit switch

2 × TTL (pull-up / pull-down, programmable)

Input reference point switch

1 × TTL for integrated reference in the encoder

Electrical properties
Max. output power

30 W

Output voltage

0 to 100 V, drive-dependent selection

Interfaces and operation
Communication interfaces

USB or Ethernet, via C-885.M1 / C-885.M2 Digital Processor and Interface Module

Motor connection/sensor
connection

Sub-D, 15 (f)I/O lines

Optional with C-885.iD Digital Interface Module for PIMotionMaster:
4 analog/digital inputs (0 to 5V/TTL), 4 digital outputs (TTL)

Command set

PI General Command Set (GCS)

User software

PIMikroMove

Application programming
interfaces

API for C / C++ / C# / VB.NET / MATLAB / Python, drivers for NI LabVIEW

Miscellaneous
24 V DC, supply via C-885 PIMotionMasterMax. current consumption

1.5 A

Operating temperature range

10 to 40 °C

Mass

200 g

Dimensions

186.42 mm × 128.4 mm (3 RU) × 19.98 mm (4 HP)

Motion Control

Operating voltage

121

MOTION|POSITIONING

C-886.31 Parallel Kinematics Controller
For Parallel-Kinematic Positioners with Q-Motion® Piezo Inertia Driven S
 ophisticated controller using vector

algorithms
n C ommanding in Cartesian coordinatesn E asy customization of coordinate systems

by commandn S uitable for Q-Motion®

SpaceFABn C
 an be optionally expanded by two single

axes
n E
 xtensive software package

C-886, dimensions in mm, here without drive modules>> Extensive Software Package>> Q-Motion® Piezoelectric Inertia Drive
Technology Glossary ....................... page 148

122

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C-886.31
FunctionController for parallel-kinematic positioners

Axes

6
Optional: 2 additional single axes

Motion and control
Drive type

Q-Motion® Piezo Inertia Drive
Optional single-axis drive type

Motor connection

Sub-D 15 (f)Controller type

PID controller

Servo cycle time of slave modules

50 µs

Cycle time of the C-886

10 ms

Encoder input

Sin / cos (differential), BiSS interface

Stall detection

Servo off, triggered by position error

Limit switches

2 × TTL per drive (polarity programmable)

Reference point switch

1 × TTL per drive

Characteristics of single axes

Depending on the drive type

Electrical properties
Output voltage

0 to 48 V

Max. output power

30 W per drive

Characteristics of single axes

Depending on the drive typeInterfaces and operation
Communication interfaces

TCP/IP: RJ45/Ethernet; USB: Mini-USB type B

Command set

PI General Command Set (GCS)

User software

PIMikroMove

Application programming interfaces

API for C / C++ / C# / VB.NET / MATLAB / Python, drivers for NI LabVIEW

Supported functions

User-defined coordinate system. Startup macro.
Data recorder for recording operating data. Wave generator for periodic motion.

Miscellaneous
External power adapter 24 V / 10 A in the scope of delivery

Max. current consumption

32 A

Operating temperature range

10 to 40 °C

Mass

4.4 kg without drive modules for single axes

Dimensions

482.6 mm × 132.55 mm × 278.55 mm

Motion Control

Operating voltage

123

MOTION|POSITIONING

E-871.1A1N PiezoMike – Q-Motion® Controller
For Closed-Loop PiezoMikes, 1 Axis, TCP/IP, USB, RS-232 Interfacen B roadband encoder inputn M acro programmable for stand-alonefunctionalityn D
 ata recordern I D chip support for quick startupn I nterfaces: TCP/IP, USB, RS-232, I/On J oystick for manual operation

Digital servo controller for piezo inertia drives

Extensive functions, software support

Integrated power amplifier and voltage generator for piezo inertia drives. Point-to-point motion, actuator mode for nanometer
precision positioning at the target position. 1 axis. For control ofclosed-loop PiezoMikes. Also suitable for Q-Motion® positioning
systems (in applications which require silent travel (20 kHz)).

Powerful macro command language. Nonvolatile macro storage, e.g., for stand-alone operation with autostart macro. Data
recorder. ID chip detection for fast startup. PID controller, parameter changing during operation. Extensive software support,e.g., for NI LabVIEW C, C++, MATLAB, Python. PIMikroMove user
software.

Interfaces
TCP/IP, USB and RS-232 for commanding. Differential signaltransmission for digital (A/B) or analog (sin / cos) encoder signals,
BiSS interface for absolute encoders. TTL inputs for limit andreference point switches. I/O lines (analog/digital) for automation. Interface for analog joystick.

Scope of Delivery
Scope of delivery includes wide-range-input power supply withpower cord, USB, RS-232 cable, and network cable.

>> Extensive Software Package>> PiezoMike Inertia Drive>> Q-Motion® Piezoelectric Inertia Drive
Technology Glossary ....................... page 148

124

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E-871.1A1N
FunctionController for closed-loop PiezoMikes, also suitable for Q-Motion® positioners*
Benchtop device with option for cabinet mounting

Drive type

Piezo inertia drive

Axes

1

Supported functions

Point-to-point motion. Startup macro. Data recorder for recording operating data suchas motor voltage, position or position error. Internal safety circuitry: Watchdog timer.
ID chip detection.

Motion and control
Controller type

PID controller, parameter changing during operation

Encoder input

Analog encoder inputs sine-cosine, interpolation selectable to 20000;
Interpolation electronics preset for differential transmission, 1 Vpp and 2.5 V encoder
offset signal; BiSS interface for absolute encoders

Stall detection

Automatic servo off

Input limit switch

2 × TTL (pull-up / pull-down, programmable)

Input reference point switch

1 × TTL for integrated reference in the encoder

Electrical properties
Max. output power

30 W

Output voltage

0 to 100 V, drive-dependent selection

Interfaces and operation
Communication interfaces

TCP/IP: RJ45/Ethernet; USB: Mini-USB type B; RS-232: Sub-D 9 (m)Motor / sensor connection

Sub-D, 15 (f)I/O lines

4 analog / digital inputs, 4 digital outputs

Command set

PI General Command Set (GCS)

User software

PIMikroMove

Application programming interfaces

API for C / C++ / C# / VB.NET / MATLAB / Python, drivers for NI LabVIEW

Manual control

Analog joystick

Miscellaneous
Operating voltage

24 V DC from external power supply (included in the scope of delivery)

Max. current consumption

1.5 A

Operating temperature range

0 to 50 °C

Mass

0.36 kg

Dimensions

147 mm × 104.5 mm × 44 mm (incl. mounting rails)

Motion Control* For applications that require/desire silent travel (20 kHz) with point-to-point motion

125

MOTION|POSITIONING

E-872.401 Q-Motion®
Piezo Motor / PiezoMike Drive Electronics
Drives up to 4 Linear Actuators, Benchtop Devicen F or positioners with Q-Motion®
piezo inertia
drives and PiezoMike linear actuatorsn I nexpensive, scalable multi-channel concept
n I ntegrated interfaces: TCP/IP, USB, USB for

joystick, digital I/O
n E
 xtensive software support

Drive electronics for 4 piezo mechanics
Drivers for inertia drives (Q-Motion® and PiezoMike) without position sensor(open-loop operation). Drives up to 4 linear actuators: The integrated amplifier
drives one axis at a time; switching between the channels is done via commands. Special variant is possible on request for operating up to 64 channels
via external module.
FeaturesFull-step and linear mode. Interfaces: TCP/IP, USB, USB for joystick, digital I/O.
Extensive functions, software support
Powerful macro command language. Nonvolatile macro storage, e.g., forstand-alone operation with autostart macro. Data recorder. ID chip detection forfast startup. Extensive software support, e.g., for NI LabVIEW, C, C++, MATLAB,
Python. PIMikroMove user software.

>> Extensive Software Package>> PiezoMike Inertia Drive>> Q-Motion® Piezoelectric Inertia Drive
Technology Glossary ....................... page 148

126

W W W. P I . W S

E-872.401
Function

Driver electronics for Q-Motion® positioners and PiezoMike linear actuators;
benchtop device

Drive type

Piezo inertia drive

Channels4
scalable to 64 channels via external module (on request)

Supported functions

Full-step mode, linear mode (analog control)

AmplifierAmplifier channels

1drives one axis at a time, the switching between the drive channels is done
via commands

Output voltage

0 to 100 V

Peak power

30 W

Output current / channel (<5 ms)±650 mA

Interfaces and operation
Communication interfaces

USB, Ethernet

Actuator connection

4 x LEMO connector, 3-pin

Digital inputs

TTL inputs for commanding and configuration

Digital output

Error status

Command set

PI General Command Set (GCS)

User software

PIMikroMove

Application programming interfaces

API for C / C++ / C# / VB.NET / MATLAB / Python, drivers for NI LabVIEW

Display and indicators

LED indicator for status and operation

Manual control

Joystick via USB

Miscellaneous
0 to 50 °C

Overtemperature protection

Deactivation at 75 °C

Dimensions

147 mm × 125 mm × 40 mm

Mass

0.46 kg

Operating voltage

24 V (power adapter in the scope of delivery)

Max. power consumption

35 W

Motion Control

Operating temperature range

127

MOTION|POSITIONING

E-872 Q-Motion®
Piezomotor Driver Electronics, OEM Board
Easy and Inexpensive Integration into OEM Applicationsn E
 asy to integraten C ompact designn V ersatile and inexpensive
n C an be used for all Q-Motion®

stages

E-872, dimensions in mm

Compact driver module for piezo inertia drives
1 channel. Compatible with all Q-Motion® stages.
Easy control via TTL signals for step and direction.
20 kHz step frequency for the highest dynamics.
Full and microstep variants
Microstep variants with 8-bit resolution for thehighest precision or full step variant for particularly easy integration and low voltage drop.
External temperature monitoring by integrated
sensor via SMBus. Low current consumption atrest.

>> Extensive Software Package>> Q-Motion® Piezoelectric Inertia Drive
Technology Glossary ....................... page 148

128

W W W. P I . W S

E-872.01

E-872.02

Function

Driver module for Q-Motion piezo
inertia drives, OEM card with solder pins,for full step operation

Driver module for Q-Motion® piezo
inertia drives, OEM card with solder pins,for microstep operation

Drive type

Piezo inertia drive

Piezo inertia drive

Channels

1

1

Control in

TTL signals for steps and motion direction

TTL signals for steps and motion direction

Maximum full step frequency

20 kHz

20 kHz (corresponds to 5.1 MHz microstep
frequency)

Microsteps per full step–256

Max. output current (<8 ms)

600 mA

600 mA

Current limitation

Short-circuit proof

Short-circuit proof

Output voltage

0 to 48 V

0 to 48 V

Control connection

Pin header, 4-pin

Pin header, 4-pin

Motor connector

Pin header, 4-pin

Pin header, 4-pin

Temperature sensor connection

Pin header, 4-pin

Pin header, 4-pin

Voltage connection

Pin header, 4-pin

Pin header, 4-pin

Supported functions

Temperature monitoring via SMBus

Temperature monitoring via SMBus

Operating voltage

48 V DC

48 V DC

Max. current consumption

0.62 A

0.62 A

Operating temperature range

5 to 50 °C

5 to 50 °C

Mass

39 g

39 g

Dimensions

46.5 mm × 35.5 mm × 24.84 mm(with pin headers)

46.5 mm × 35.5 mm × 24.84 mm(with pin headers)®

AmplifierElectrical properties

Interfaces and operation

Environment

Motion Control

Ask about custom designs!

129

MOTION|POSITIONING

Accessories

130

W W W. P I . W S

Adapter Plates and Brackets for Multi-Axis Combinations ...................................................................................................... 132
Q-122 Adapter Bracket ...................................................................................................	 132
Q-145 Adapter Bracket ...................................................................................................	 136
Q-121 Adapter Brackets and Adapter Plate .....................................................................	 138
Q-101.AP1 Adapter Plate ................................................................................................	 141

Vacuum Feedthroughs .............................................................................................................................................................. 142
Vacuum Feedthroughs for 10–6 hPa ................................................................................	 142
Vacuum Feedthroughs for 10–9 hPa ................................................................................	 143

Accessories

Adapter and Extension Cables ................................................................................................................................................. 147

131

MOTION|POSITIONING

Q-122 Adapter Bracket
For Vertical Mounting of Q-522 Miniature Linear StagesnFor vertical mountingnFor axes with 6.5 to 26 mm travel rangesnUHV version without anodization

Q-122.000

Adapter bracket for vertical mounting of Q-522 miniature linear stages with 6.5 mm travel range

Q-122.00U

Adapter bracket for vertical mounting of Q-522 miniature linear stages with 6.5 mm travel range,
vacuum compatible to 10–9 hPa

Q-122.100

Adapter bracket for vertical mounting of Q-522 miniature linear stages with 13 mm travel range

Q-122.10U

Adapter bracket for vertical mounting of Q-522 miniature linear stages with 13 mm travel range,
vacuum compatible to 10–9 hPa

Q-122.200

Adapter bracket for vertical mounting of Q-522 miniature linear stages with 26 mm travel range

Q-122.20U

Adapter bracket for vertical mounting of Q-522 miniature linear stages with 26 mm travel range,
vacuum compatible to 10–9 hPa

132

W W W. P I . W S

Adapter bracket Q-122.000,
dimensions in mm

Accessories

Adapter bracket Q-122.00U,
dimensions in mm

133

MOTION|POSITIONING

Adapter bracket Q-122.100,
dimensions in mm

Adapter bracket Q-122.10U,
dimensions in mm

134

W W W. P I . W S

Adapter bracket Q-122.200,
dimensions in mm

Accessories

Adapter bracket Q-122.20U,
dimensions in mm

135

MOTION|POSITIONING

Q-145 Adapter Bracket
For Vertical Mounting of Q-545 Linear Stagesn

For vertical mountingnFor axes with 13 to 26 mm travel rangesn

UHV version without anodization

Q-145.1001

Adapter bracket for vertical mounting of Q-545 linear stages with 13 mm travel range

Q-145.10U1

Adapter bracket for vertical mounting of Q-545 linear stages with 13 mm travel range,
vacuum compatible to 10–9 hPa

Q-145.200

Adapter bracket for vertical mounting of Q-545 linear stages with 26 mm travel range

Q-145.20U

Adapter bracket for vertical mounting of Q-545 linear stages with 26 mm travel range,
vacuum compatible to 10–9 hPa

Delivery includes:n

2 dowel pins A2 2.5 m6 x 4 ISO 2338

n

4 socket head cap screws A2 M2.5x8 ISO 4762

136

W W W. P I . W S

Q-145.1xxx, dimensions in mm

Accessories

Q-145.2xx, dimensions in mm

137

MOTION|POSITIONING

Q-121 Adapter Brackets and Adapter Plate
For Mounting Q-521 Miniature Linear StagesnFor setup of multi-axis systemsnFor vertical and XY mountingnFor travel ranges of 12, 22, and 32 mm

Q-121.10U

Adapter bracket for vertical mounting of Q-521 miniature linear stages
with 12 mm travel range, not anodized

Q-121.20U

Adapter bracket for vertical mounting of Q-521 miniature linear stages
with 22 mm travel range, not anodized

Q-121.30U

Adapter bracket for vertical mounting of Q-521 miniature linear stages
with 32 mm travel range, not anodized

Q-121.80U

Adapter plate for XY mounting of Q-521 miniature linear stages, not anodized

138

W W W. P I . W S

Adapter bracket Q-121.10U, dimensions in mm

Accessories

Adapter bracket Q-121.20U, dimensions in mm

139

MOTION|POSITIONING

Adapter bracket Q-121.30U, dimensions in mm

Adapter plate Q-121.80U, dimensions in mm

140

W W W. P I . W S

Q-101.AP1 Adapter Plate
For Q-Motion® Positioners on Plug-in Boards with 25-mm or 1-inch Gridn

Easy mounting of Q-Motion® positioners
on plug-in boardsn or plug-in boards with 25-mm or 1-inch
F
grid

n

Black anodized

Accessories

Q-101.AP1 adapter plate, dimensions in mm

141

MOTION|POSITIONING

Vacuum Feedthroughs for 10 –6 hPa
Suitable for Q-Motion® stages and controllers

C-815.VF

Vacuum feedthrough for drive and sensor signals, Sub-D 15 (m/f)

C-815.VF vacuum feedthrough Sub-D 15 (m/f), dimensions in mm.
Note that the decimal places are separated by a comma in the drawings.

142

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Vacuum Feedthroughs for 10 –9 hPa
Suitable for Q-Motion® stages and controllers

C-815.VFU1

Vacuum feedthrough for drive and sensor signals, Sub-D 15 (m/m), DN40CF

C-815.VFU1 vacuum feedthrough, Sub-D 15 (m/m), dimensions in mm.
Note that the decimal places are separated by a comma in the drawings.

Accessories

1 Vacuum side
2 Air side

143

MOTION|POSITIONING

C-815.VFU3

Vacuum feedthrough for drive and sensor signals, 3 x Sub-D 15 (m/m), DN63CF

C-815.VFU3 vacuum feedthrough, Sub-D 15 (m/m), dimensions in mm.
Note that the decimal places are separated by a comma in the drawings.
1 Vacuum side
2 Air side

144

W W W. P I . W S

C-815.VFU6

Vacuum feedthrough for drive and sensor signals, 6 x Sub-D 15 (m/m), DN100CF

C-815.VFU6 vacuum feedthrough, Sub-D 15 (m/m), dimensions in mm.
Note that the decimal places are separated by a comma in the drawings.

Accessories

1 Vacuum side
2 Air side

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MOTION|POSITIONING

C-815.VFU15

Vacuum feedthrough for drive and sensor signals, 15 x Sub-D 15 (m/m), DN160CF

C-815.VFU15 vacuum feedthrough, Sub-D 15 (m/m), dimensions in mm.
Note that the decimal places are separated by a comma in the drawings.
1 Vacuum side
2 Air side146

W W W. P I . W S

Adapters and Extension Cables

For PILine® Stages
U-600.A01

Extension cable for PILine®, Sub-D 15-pin, 1 m

U-600.A03

Extension cable for PILine®, Sub-D 15-pin, 3 m

U-600.A05

Extension cable for PILine®, Sub-D 15-pin, 5 m

U-600.A08

Extension cable for PILine®, Sub-D 15-pin, 8 m

U-600.A10

Extension cable for PILine®, Sub-D 15-pin, 10 m

U-600.AMD

PILine® adapter cable MDR14 (m) to Sub-D 15 (m) 1.5 m

U-600.ADM

PILine® adapter Sub-D 15 (f) to MDR14

For PiezoMike Actuators
N-400.A02

Extension cable, LEMO 3-pin to LEMO 3-pin, 2 m

N-400.A05

Extension cable, LEMO 3-pin to LEMO 3-pin, 5 m

N-400.A08

Extension cable, LEMO 3-pin to LEMO 3-pin, 8 m

N-400.A12

Extension cable, LEMO 3-pin to LEMO 3-pin, 12 m

N-400.ALM

Adapter LEMO 3-pin to mini DIN

N-400.AML

Adapter mini DIN to LEMO 3-pin

For Q-Motion® Stages
Air-side extension cable from vacuum feedthrough or Q-545.xx0
to the adapter cable to the electronics, Sub-D 15 (f) to Sub-D 15 (m), 1 m

E-873.UHV2

Air-side extension cable from vacuum feedthrough or Q-545.xx0
to the adapter cable to the electronics, Sub-D 15 (f) to Sub-D 15 (m), 2 m

E-873.UHV3

Air-side extension cable from vacuum feedthrough or Q-545.xx0
to the adapter cable to the electronics, Sub-D 15 (f) to Sub-D 15 (m), 3 m

Accessories

E-873.UHV1

147

MOTION|POSITIONINGTerms and Technology GlossaryA

D

Absolute encoder

Design resolution

Absolute encoders are used for detecting the position and provide information on the absolute position of a motion platform.
For example, this can be realized optically by using an additional
Pseudo Random Code (PRC) scale.

The theoretical minimum movement that can be made. Design
resolution must not be confused with minimum incremental
motion. In indirect position measurement methods, values for
spindle pitch, gear ratio, motor or sensor/encoder resolution, forexample, are included in the calculation of the resolution; normally it is considerably below the minimum incremental motionof a mechanical system. Indirect measurement methods, theresolution of the sensor is specified.

C
Closed-loop operation
Piezo servo controllers have additional circuitry for position
sensing and servo-control that compensates for nonlinearity,hysteresis, and creep. Displacement of the piezo is controlled byan analog signal. Positioning accuracy and repeatability down
to the subnanometer range is possible, depending on the piezomechanics and sensor type. High-resolution position sensors
provide optimum positional stability and fast response in thenanometer range. The integrated notch filters (adjustable foreach axis) improve stability and allow high bandwidth operation
closer to the resonant frequency of the mechanics.
PI piezo drivers for PICMA® actuators have an output voltage rangeof up to –30 to +135 V to provide enough margin for the servocontroller to compensate e.g. for load changes. See “Open-loop
operation”, “Capacitive sensors”, “Strain gauge sensors”.
Crossed roller guide
Crossed roller guides are comparatively stiff and manage withlow preload. This results in reduced friction with high load capacity, high guiding accuracy, and smooth running. An additional
forced cage control helps to prevent the roller bearing from creeping. Nevertheless, this shortens the possible travel range overthe same axis length.
CrosstalkDeviation from the ideal motion in axes perpendicular to thedirection of motion.
Angular errors are xrx = roll, xry = pitch, xrz = yaw. Linear errors
are lateral runout such as xty = straightness, xtz = flatness. See“Linearity error”.
Current consumption
Current consumption of the system on supply end. It is specified
for controller without load. Alternatively, power consumption.
Current limitation
Short-circuit protection.

Direct metrology
Position measuring is performed with the highest accuracy
directly at the motion platform so that nonlinearity, mechanical play or elastic deformation have no influence on position
measuring. This is achieved by noncontact optical linear encoders. Precision positioning systems use different encoder types
as position sensor: Incremental encoders with different accuracy
levels, absolute-measuring encoders that additionally make referencing unnecessary when a machine is switched on again, andfor travel ranges under 2 mm, capacitive sensors.
Drive typeDefines the types of drive supported by the controller / driver,such as DC motors, piezo stepping drives, piezo actuators.

E
Encoder
An encoder is used for determining the position. Basically, adifference is made between linear and rotary encoders, which,depending on the configuration, operate either incrementallyor absolutely.
Encoder input
Maximum bandwidth (-3 dB) of the input signals for the encoder
input.
Extensive software package
To make systems more user friendly, software plays an important role in positioning systems. Customers expect a plug-andplay solution even if several positioning systems are combinedor different drive systems need to interact, and that is why PI(Physik Instrumente) provides PIMikroMove® host software. You
only need to enter your parameters into the application to avoid
programming altogether. Also supports a number of text-based

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W W W. P I . W S

languages, has its own LabVIEW, Python and Matlab drivers,
and the software is compatible with Windows, Linux, and OSX.
However, not all software tools may be available for all controller versions.

F
Flatness
See “Crosstalk”.

L
Lateral force, max.
Maximum lateral force perpendicular to the operating direction.
For piezo systems the lateral force is limited by the piezo actuator and the flexure designs. For XY stages the push / pull force
capacity of the other module (in its operating direction) limits
the lateral force that can be tolerated.
Limit switch
Function: Optical, magnetic.

Flexure guiding system
Piezo systems from PI (Physik Instrumente) use lever-amplified
piezo actuators as the drive, e.g., when adjusting optical lenses. For optimum results regarding dynamics and accuracy, it
is necessary to ascertain and optimize the mechanical and piezoelectric properties such as the guiding accuracy, crosstalk or
temperature-related drift in the overall system. Friction-free flexure guides that allow hysteresis-free motion steer the motion
and retain the stiffness. Very small, but subnanometer precision
motion is transferred to the required system motion by using
lever amplification.

I

Linear amplifier / driver
Most piezo drivers use linear amplifiers (class AB) to generate
the output voltage. In open-loop (voltage-controlled) piezo operation the amplifier output voltage is determined by an analog
input optionally combined with a DC offset.
Linear ball guiding
Linear ball guides require exact tolerances between the guideand bearing in order to keep the play and friction as low as
possible. This limits the load capacity. Due to the simple design,
they are only suitable for inexpensive applications with comparatively low requirements.
Linear encoder

ID chip
An ID chip is located in the connector of many piezo stages.
When the stage is calibrated at the factory with a digital controller, the calibration data is saved together with specific productinformation on the ID chip. When switched on, digital electronics
read the data from the ID chip of the connected stage. Stages,
whose ID chip contains the calibration data, can therefore beconnected to any suitable digital electronics without renewed
calibration.
Incremental encoder
When incremental encoders are in motion, they generate impulses that are counted by the controller. However, in contrast to
absolute encoders, it is a question of determining a relative
position. To determine an absolute position, a limit switch orreference point switch signal must also be referenced.
Input level
Permissible input level for digital interfaces.

Linear encoders measure the position directly at the motion platform. As a rule, this means that a higher accuracy is achieved
compared to rotary encoders, because nonlinearity, mechanicalplay, and elastic deformation have no influence.
Linearity error
Deviation in motion direction, of measured position from commanded position (positioning accuracy). Measured with an
external, traceable device. The value is given as a percentageof the entire measuring range.
Measurement of the linearity error: The target and measured
actual values of the positions are plotted against each other,a line is drawn through the first and last data point, and the
maximum absolute deviation is determined. A linearity error of
0.1 % corresponds to an area of ±0.1 % around the ideal line.
Example: A linearity error of 0.1 % over a measuring range of
100 µm produces a possible maximum error of 0.1 µm.
Linearization

Absolute measuring capacitive, piezo resistive (PRS) or strain
gauge (SGS) and optical (absolute and relative) sensors are used
to provide position information to the controller.

Digital piezo controllers offer the best positioning accuracy
through linearization algorithms with higher-order polynomials.
The linearity error with capacitive sensors can be reduced toless than 0.01 %. See “Dynamic digital linearization”, “Sensor
linearization”.

149

MOTION|POSITIONING

Terms and Technology
Glossary

Integrated feedback sensor

Terms and Technology Glossary
Load capacity
Maximum vertical load, when the stage is mounted horizontally.
Limited by the flexure designs or the load capacity of the piezo
actuators.

Mand hysteresis remain uncompensated. Open-loop operation is
ideal for applications where fast response and very high resolution with maximum bandwidth are essential. Here, commanding
and reading the target position in absolute values is either notimportant or carried out by external position sensors. Open-loop
operation is not possible for electro-magnetic direct drives, suchas linear motors and voice-coil drives.
Operating limits

Magnetic bearing
Magnetic levitation allows excellent linear and rotational guiding
accuracy on a plane. The passive runner hovers of a magnetic
field and is then actively guided by it. Flatness errors are measured and compensated by very accurate noncontact sensors. Contrary to air bearings, which are also very accurate, magnetic
bearings can also be used in vacuum.

N
NEXACT® Piezo walking drive
Precision piezomotor that creates the walking motion by meansof piezo bending elements, in order to move a runner. The drives
are very compact and achieve relatively high velocities around
10 mm/s, and forces up to 10 N. A suitable selection of the piezo
elements optimizes step size, clamping force, velocity, and stiffness for the respective applications.

Values measured at an ambient temperature of 20° C. A sineis used as control signal in open-loop operation. The amplifier
works linearly within the operating limits, in particular without
thermal limitation.
Operating temperature range
In any case, the device can be operated safely in the maximum
permissible temperature range. To avoid internal overheating
however, full load is no longer available above a certain temperature (maximum operating temperature under full load). Nevertheless, recalibration or zero-point-adjustment may be required
if the system is operated at different temperatures. Performance
specifications are valid for room temperature range. Please referto individual datasheets and contact PI for more details.
Operating voltage
Allowed control input voltage range (also input frequency) for
the supply of the device.

NEXLINE® Piezo walking drive

Output voltage

High-load piezomotor that combines piezo clamping and shear
actuators, in order to move a runner. The drives feature particularly high force and stiffness of several 100 N. They are capableof dynamically compensating oscillations in the range of a few
micrometers with nanometer resolution. Furthermore the drives
are designed for positioning and holding forces of up to 800 N,
and work at velocities of about 1 mm/s.

The output voltage of piezo controllers show exceptional longterm stability with variations of only a few millivolt.
Overtemperature protection
Switch-off temperature for voltage output. No automatic restart.

P

Noise
For capacitive sensors. In extended measurement ranges, noise
is considerably higher than in the nominal measurement range.
Nonlinearity
See “Linearity error”.

Patents
PI owns a large variety of patents on piezo and motor technology.
Parallel kinematics, hexapods

O
Open-loop operation
The actuator is used without a position sensor. Displacement
roughly corresponds to the drive voltage. Creep, nonlinearity

Hexapods are parallel-kinematic systems with six drives that areconnected directly to a single platform. This makes it possible
for users to position objects automatically in all degrees of freedom, X, Y, Z, and rotatory and, depending on the drive, with anaccuracy in the micrometer range or lower. The parallelkinematic
system is very stiff, with only a low passive weight to move and,with the corresponding design, can carry loads of up to several

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W W W. P I . W S

tons. Users are able to arbitrarily choose the reference coordinate system and, today, workers are now working together withhexapods on the production line. The user integrates the system
into the automation environment via EtherCAT.
Peak current
Only available for very short times, typically under a few milliseconds. It is used to estimate the possible dynamics with acertain capacitive load. Note: In this case, the piezo controller /driver does not necessarily work linearly.
PICA / PICA Power
PICA piezo actuators are specifically designed for high duty cycle
applications. PICA Power actuators are additionally optimized forhigh-temperature working conditions.
All materials used are specifically matched for robustness andlifetime. Endurance tests on PICA actuators prove consistent
performance, even after billions (1,000,000,000 ) of cycles. The
combination of high displacement and low electrical capacitanceprovides for excellent dynamic behavior with reduced driving
power requirements.

PIglide Air Bearing Technology
The PIglide air bearing technology allows friction-free positioning with a high guiding accuracy of up to 5 μrad over 100 mm.
The technology improves the position resolution and it is possible to realize constant-velocity scanning. The repeatability is only
a few encoder impulses. A similar precision in the nanometer
range is also possible with flexure-guided piezo nanopositioners, however, only over considerably shorter travel ranges. The
developers at PI (Physik Instrumente) adapt high-precision, air
bearing positioning stages and motion control systems according to customer requirements.
PILine® Ultrasonic Piezomotors
PILine® Ultrasonic piezomotors are precise, dynamic, small, andsilent, and replace classical drive technologies, because thedrives are also self-locking. As a result, they don’t have to besupplied with current when at rest and that, in turn, reduces theenergy requirements of the application. For this reason and dueto their small size, the drives are very popular for mobile devices
in the optical industry and measuring technology.

PICMA® actuators take advantage of the indirect piezoelectriceffect and achieve high forces with relatively low voltages. They
only need a small amount of installation space. At the sametime, the PICMA® actuators are very dynamic and can reach aposition with a hitherto unattained precision. This is the reason
why they are used as micropumps in metering technology.
Due to their ceramic insulation, PICMA® actuators exhibit highreliability and climate resistance. PI (Physik Instrumente) also
equips PICMA® actuators with individual connections for customer applications.

Magnetic direct drives from PI (Physik Instrumente) provide a
direct and stiff connection between the load to be moved andthe drive. The industry demand is particularly high when objects
need to be positioned with high dynamics and precision. Thanks
to the smooth-running precision linear guides with crossed roller bearings, these types of linear motor stages are particularly
suitable for applications that require constant-velocity scanning.
The drives operate without contact and therefore very reliable.
Users can integrate the magnetic direct drives into existing machines and systems quickly and easily via standardized fieldbus
systems. See “Linear motor”, “Torque motor”

PICMAWalkPIMag® Voice Coil

PICMAWalk drives achieve feed forces up to 50 N and holding
forces to 60 N. The maximum velocity is 15 mm/s. PICMAWalkuses the proven PICMA® multilayer piezo actuators. That means
lower piezo voltages to 120 V. PICMA® piezo actuators also
ensure a long lifetime and the outstanding reliability of the
PICMAWalk technology.

Thanks to their low weight and friction-free drive principle, voicecoil drives are small and particularly suitable for applications
that require high dynamics and high velocities over limited
travel ranges – for example, in medical technology. Voice coildrives have a greater advantage for the customer when compared to traditional drive screw-based solutions, particularly
with respect to wear and dynamics. High scan frequencies andprecision positioning are possible with these drives, because
they are free of hysteresis effects. See “Voice Coil Drive”.

PiezoWalk® walking drive
PiezoWalk® drives take advantage of the piezo walking principle and combine a subnanometer resolution with high forces, arobust design, and a scalable travel range. Industry customers
use walking drives for travel ranges greater than 1 mm and to
hold a stable position with nanometer precision resolution. PI(Physik Instrumente) offers walking drives with high feed forces
as well as positioning and holding forces, but also relatively highvelocities, and they also have a long lifetime in a vacuum. See“NEXLINE®”, “NEXACT®”, and “PICMAWalk”.

151

MOTION|POSITIONING

Terms and Technology
Glossary

PIMag® Magnetic Linear Motors
PICMA® Multilayer piezo actuators

Terms and Technology Glossary
PIOne Linear Encoder
The high-resolution PIOne encoder allows direct position measuring with a position resolution of much less than one nanometerand a linearity error of less than 1 %. Basic features are the low
power consumption, the high signal stability that results inalmost no noise, the signal processing optimized for highprecision positioning, and the small size of the sensor head.
PIOne was developed by PI which allows for best flexibility forcustomization and use in OEM stages.
PIRestPiezo actuator technology for active adjustment of consistently
stable gaps of several µm with subnanometer precision. The
PIRest actuator is only powered during the actual positioning
sequence and holds its position without power.

Q
Q-Motion® Piezoelectric Inertia Drive
Piezo inertia drives are space-saving and affordable piezo-based
drives with relatively high holding forces and a virtually unlimited travel range. With an operating frequency of up to 20 kHz,the drives reach velocities of more than 5 mm/s that act directly on the runner. The Q-Motion® drive operates silently at the
maximum operating frequency of 20 kHz. When at rest, the drive
is self-locking, requires no current, and does not generate any
heat. It holds the position with maximum force. It is therefore
suitable for battery-powered, mobile applications with a low
number of load cycles.

R

Pitch
See “Crosstalk”.

Recirculating Ball Bearing

Power consumption
Maximum power consumption under full load.
Profile generator
Functionality of motor controllers that allows motion profiles
such aslinear interpolation, point-to-point, trapezoid, double
bends. For several axes: Electronic gearing.

Due to their design, recirculating ball bearings are alreadyinsensitive to creeping. For example, they are suitable for highprecision axes, which are often used for scanning smaller areas.
When assembled correctly, they offer a high load capacity and at
the same time, long lifetime, no maintenance, and high guiding
accuracy.
Reference point switch

Pulse width modulation (PWM)

Function: Optical, magnetic.

PWM-controlled motors allow control of the (motor) performancewith a high-frequency-signal. This means that the power signal
can be separated from the digital control signal.
PWM control is used for example, with high-performance switching amplifiers for piezo actuators, or for controlling electricmotors such linear motors or voice coil drives. The “ActiveDrive
Motor” is a special feature from PI, see there.

Repeatability

Push / pull force capacity (in operating direction)
Specifies the maximum forces that can be applied to the systemalong the active axis. Limited by the piezoelectric material andthe flexure design. If larger forces are applied, damage to thepiezo actuator, the flexures or the sensor can occur. The force
limit must also be considered in dynamic applications.
Example: the dynamic forces generated by sinusoidal operation
at 500 Hz, 20 µm peak-to-peak, 1 kg moved mass, are approximately ±100 N.

Typical values in closed-loop operation mode (RMS, 1 σ). Repeatability is a percentage of the total distance or angle traveled. For
small ranges, repeatability may be significantly better.
Resolution
Position resolution relates to the smallest change in displacement that can still be detected by the measuring devices. The
resolution in piezo-based positioning systems and piezo actuators is basically unlimited because it is not affected by staticor sliding friction. Instead, the equivalent to electronic noise isspecified. Values are typical results (RMS, 1 σ).
Roll
See “Crosstalk”.
Rotational runout
See “Crosstalk”.

152

W W W. P I . W SSStraightness
See “Crosstalk“.

Sensor bandwidth
Measured value that specifies the frequency, with which theamplitude decreased by -3 dB.

T

Sensor linearization

Trajectory control

For capacitive sensors, the signal conditioning electronics
demonstrates a notably low noise level. The integrated linearization system (ILS) compensates for the influences of parallelism
errors between the capacitor plates.

Provisions to prevent deviation from the specified trajectory.
Can be passive (e.g., flexure guidance) or active (e.g., using
additional active axes and sensors).

Sensor resolution
The smallest calculable increment that can be detected by themeasuring system used. Rotary encoder: Number of counts per
screw rotation. Linear encoder: Smallest increment still detectedby the sensor system used. The sensor can be the critical element in position resolution, for this reason the sensor resolution
is specified separately if necessary. See “Design resolution”.
Serial kinematics
Each actuator acts on its own platform. There is a clear relationship between actuators and motion axes. The advantages are
the relatively simple assembly and multi-axis control. The dynamic characteristics depend on the individual axis. Guiding
errors cumulate and the overall guiding accuracy is poorer if
compared to “Parallel kinematics”, see there.
Serial metrology
One sensor is assigned to each moving axis to be servo-controlled. Undesired off-axis motion, guiding error or crosstalk, go
unnoticed and uncorrected. See “Parallel metrology”.
Specification
Performance specifications are valid for room temperature(22 ±3 °C) and closed-loop systems are calibrated at this temperature (specifications for different operating temperatureson request). Recalibration is recommended for operation atsignificantly higher or lower temperature. Custom designs forultralow or ultrahigh temperatures on request.

U
User software and functions
PIMikroMove®, PI General Command Set (GCS). Drivers for LabVIEW , shared libraries for Windows and Linux. Compatible with
µManager, MetaMorph, MATLAB. Wave Generator. Linearization. Data recorder. Auto zero. Trigger I/O. Software configurable
servo parameters. See “Extensive software package”.

V
Vacuum-compatible versions
In a large number of industry sectors, production in a vacuum
is becoming increasingly more important. Therefore, PI (Physik
Instrumente) offers various different drive technologies to its
customers that can be operated in a vacuum of 10–7 or even
10–10 hPa. This includes piezo actuators that work in strong
magnetic fields and in a cryogenic environment, piezo systems
with travel ranges lower than 1.5 mm and subnanometer precision, piezomotors in a variety of designs with respect to force,
dynamics, and travel range, as well as classical motorization
with specially designed DC or stepper motors that allow greater
travel ranges.

Y
Yaw

Spring constant, nonlinear for piezoelectric materials. Static
large signal stiffness of the stage in operating direction at room
temperature. Small signal stiffness and dynamic stiffness may
differ because of effects caused by the active nature of piezoelectric material or compound effects, for example.

See “Crosstalk”.

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MOTION|POSITIONING

Terms and Technology
Glossary

Stiffness

Product Index

C-867.1U PILine® Motion Controller ...........................................................................................................................................	 104
C-867.1xC885 PILine® Controller Module ...................................................................................................................................	 118
C-867.2U2 PILine® Motion Controller .........................................................................................................................................	 106
C-877.1U11 PILine® Motion Controller .......................................................................................................................................	 108
C-877.2U12 PILine® Motion Controller .......................................................................................................................................	 110
C-885 PIMotionMaster ...............................................................................................................................................................	 116
C-886.31 Parallel Kinematics Controller .....................................................................................................................................	 122

E-871.1A1N PiezoMike – Q-Motion® Controller ..........................................................................................................................	 124
E-872 Q-Motion® Piezomotor Driver Electronics, OEM Board ....................................................................................................	 128
E-872.401 Q-Motion® Piezo Motor / PiezoMike Drive Electronics ...............................................................................................	 126
E-873 Q-Motion® Digital Servo Controller, 1 Axis .......................................................................................................................	 112
E-873.10C885 Q-Motion® Controller Module for C-885 PIMotionMaster ....................................................................................	 120
E-873.3QTU Q-Motion® Digital Servo Controller, 3 Axes ............................................................................................................	 114

N-412 Linear Actuator with Q-Motion® Piezo Motor ...................................................................................................................	 98
N-422 Linear Actuator with Q-Motion® Piezo Motor ...................................................................................................................	 100
N-450 PiezoMike Miniature Linear Actuator ...............................................................................................................................	 86
N-470 PiezoMike Linear Actuator ...............................................................................................................................................	 88
N-470.V / N-470.U PiezoMike Linear Actuator ............................................................................................................................	 90
N-472 PiezoMike Linear Actuator ...............................................................................................................................................	 92
N-474 PiezoMike Linear Actuator ...............................................................................................................................................	 94
N-480 PiezoMike Miniature Linear Actuator ...............................................................................................................................	 96
N-565 Linear Stage with the Highest Precision ..........................................................................................................................	 46
N-765 Precision Z Stage .............................................................................................................................................................	 48
N-865 NEXACT® SpaceFAB ........................................................................................................................................................	 82

Q-101.AP1 Adapter Plate ............................................................................................................................................................	 141
Q-121 Adapter Brackets and Adapter Plate ................................................................................................................................	 138
Q-122 Adapter Bracket ...............................................................................................................................................................	 132
Q-145 Adapter Bracket ...............................................................................................................................................................	 136
Q-521 Q-Motion® Miniature Linear Stage ...................................................................................................................................	 30
Q-522 Q-Motion® Miniature Linear Stage ...................................................................................................................................	 36
Q-545 Q-Motion® Precision Linear Stage ...................................................................................................................................	 42
Q-614 Q-Motion® Miniature Rotation Stage ...............................................................................................................................	 70
Q-622 Q-Motion® Miniature Rotation Stage ...............................................................................................................................	 72
Q-632 Q-Motion® Rotation Stage ...............................................................................................................................................	 74
Q-821 Q-Motion® Miniature SpaceFAB Robot ............................................................................................................................	 80
Q-845 Q-Motion® SpaceFAB .......................................................................................................................................................	 78

U-521 PILine® Linear Stage ........................................................................................................................................................	
U-523 PILine® Linear Stage ........................................................................................................................................................	
U-624 PILine® Rotation Stage .....................................................................................................................................................	
U-628 PILine® Rotation Stage .....................................................................................................................................................	
U-651 Rotation Stage with Low-Profile Design ..........................................................................................................................	
U-723 PILine® XY Stage .............................................................................................................................................................	
U-751 XY Stage with Piezomotors .............................................................................................................................................	
U-780 PILine® XY Stage System with Controller and Joystick ...................................................................................................	

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26
28
64
66
68
52
54
58

Physik Instrumente (PI) GmbH & Co. KG
Auf der Roemerstrasse 1, 76228 Karlsruhe
Germany
Phone +49 721 4846-0
Fax+49 721 4846-1019
info@pi.ws
www.pi.ws
General Management: Dr. Karl Spanner, Dr. Peter Schittenhelm, Markus Spanner;
Commercial Register: Reg.-Gericht Mannheim: HRA 104804; VAT-No.: DE 1431 828 03;
WEEE-Reg.-No.: DE 93978928;
General Partner: Physik Instrumente (PI) Verwaltungs GmbH;
Commercial Register: Reg.-Gericht Mannheim: HRB 109941;
Although the information in this document has been compiled with the greatest care, errors cannot be ruled out completely.
Therefore, we cannot guarantee for the information being complete, correct and up to date. Illustrations may differ
from the original and are not binding. PI reserves the right to supplement or change the information provided without
prior notice.
The company names or marks listed below are registered trademarks of Physik Instrumente (PI) GmbH & Co. KG: PI®, PIC®,PICMA®, PILine®, PIFOC®, PiezoWalk®, NEXACT®, NEXLINE®, PInano®, NanoCube®, Picoactuator®, Nanoautomation®, NEXSHIFT,
PicoCube, PiezoMove, PIMikroMove, PIMag®
The company names or marks listed below are registered trademarks of their owners:
BiSS, μManager, EtherCAT, LabVIEW, Leica, Linux, MATLAB, MetaMorph, Microsoft, National Instruments, Nikon, Olympus, Windows, Zeiss.
CAT135E Precision and Dynamics with Piezo Motor Stages 06/2018 3.0. ® Physik Instrumente (PI) GmbH & Co. KG 2018.
Subject to change without notice.
All contents, including texts, graphics, data etc., as well as their layout, are subject to copyright and other protective laws.
Any copying, modification or redistribution in whole or in parts is subject to a written permission of PI.

155

MOTION|POSITIONINGMOTION|POSITIONING

Headquarters

Subsidiaries

GERMANY

USA (East) & CANADA

USA (West) & MEXICO

Physik Instrumente (PI)GmbH & Co. KG
Auf der Roemerstrasse 176228 Karlsruhe
Phone +49 721 4846-0
Fax		 +49 721 4846-1019
info@pi.ws
www.pi.ws

PI (Physik Instrumente) L.P.
Auburn, MA 01501
www.pi-usa.us

PI (Physik Instrumente) L.P.
Irvine, CA 92620
www.pi-usa.us

USA (San Francisco Bay Area)

UK & IRELAND

PI (Physik Instrumente) L.P.
Sausalito, CA 94965
www.pi-usa.us

PI (Physik Instrumente) Ltd.
Cranfield, Bedford
www.physikinstrumente.co.uk

PI miCos GmbH
Freiburger Strasse 30
79427 Eschbach
Phone +49 7634 5057-0
Fax		 +49 7634 5057-99
info@pimicos.com
www.pi.ws

ITALY		NETHERLANDS

Physik Instrumente (PI) S. r. l.
Bressowww.pionline.it

PI Benelux B.V.
Sint-Oedenrode
www.pi.ws/benelux

FRANCE		SPAIN

PI France SAS
Aix-en-Provence
www.pi.ws

Micos Iberia S.L.
Vilanova i la Geltrú
www.pimicos.es

PI Ceramic GmbH
Lindenstrasse
07589 Lederhose
Phone +49 36604 882-0
Fax		 +49 36604 882-4109
info@piceramic.com
www.piceramic.com

JAPAN
PI Japan Co., Ltd.
Tokyo
www.pi-japan.jp

PI Japan Co., Ltd.
Osaka
www.pi-japan.jp

CHINA
Physik Instrumente(PI Shanghai) Co., Ltd.
Shanghaiwww.pi-china.cn

Physik Instrumente(PI Shanghai) Co., Ltd.
Beijing
www.pi-china.cn

SOUTHEAST ASIA

TAIWAN

PI (Physik Instrumente)
Singapore LLP
Singaporewww.pi-singapore.sg
For ID / MY / PH / SG / TH / VNM

Physik Instrumente (PI)Taiwan Ltd.
Taipeiwww.pi-taiwan.com.tw

KOREA
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PI Korea Ltd.
Seoul
www.pikorea.co.kr

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