Precision
Motion Control Solutions
S TA G E S F O R M E D I U M L O A D S A N D T R AV E L R A N G E S T O 3 0 0 M M

W W W. P I . W S

L-406 Compact Linear StageFor loads up to 10 kg

n T ravel ranges from 26 mm to 102 mm(1” to 4”)n S tepper motor or DC servo motor withand without gearheadn D irection-sensing reference point switchn I ntegrated optical limit switches

Precision-class linear stage

Position measurement

The linear stage has a ground precision leadscrew that ensuressmooth running. The combination of recirculating ball bearing
and the stress-relieved aluminum base ensures good performance data.

Integrated rotary encoder on the motor shaft (variants with DC
servo motor).
Fields of application
Precision positioning in industry and research, inspection, micromanipulation.

Drive types
n . xxDD variant: DC servo motor for an average velocity up

to 20 mm/s
n . xxDG variant: DC servo motor with gearhead for hightorques and resolution at low motor powern . xxSD variant: 2-phase stepper motor

Noncontact limit switches. Noncontact optical reference pointswitch with direction sensing in the middle of the travel range.

L-406 linear stages can be combined
without adapter plate for multi-axis
positioning on several axes.

L-406 with DC motor

L-406 1/4

W W W. P I . W S

Active axis

L-406.10DD10
L-406.20DD10
L-406.40DD10

L-406.10DG10
L-406.20DG10
L-406.40DG10

L-406.10SD00
L-406.20SD00
L-406.40SD00

Linear stage withDC motor androtary encoder

Linear stage
with DC gear
motor and rotary
encoder

Linear stage withstepper motor

X

X

X

Unit

Tolerance

mm

max.

Motion and positioning
Travel range*

26 / 52 / 102

26 / 52 / 102

26 / 52 / 102

Integrated sensor

Rotary encoder

Rotary encoder–

Sensor resolution rotary
encoder

1024

512

–

cts./rev.

Design resolution

0.244

0.01650.313**µm

Minimum incremental motion

0.5

0.2

0.2

µm

typ.

Unidirectional repeatability

0.5

0.5

0.5

µm

typ.

Backlash

±3

±3

±3

µm

typ.

Crosstalk, rotational (pitch,yaw)±70 / ±90 / ±100

±70 / ±90 / ±100

±70 / ±90 / ±100

µrad

typ.

Linear crosstalk (straightness,flatness)

2/4/6

2/4/6

2/4/6

µm

Max. velocity

20

3

20

mm/s

max.

Mechanical properties
Load capacity

100

100

100

N

max.

Push/pull force

15

100

50

N

max.

Permissible lateral force

50

50

50

N

max.

Holding force

25

50

50

N

max.

mm

Drive properties
Spindle pitch

1

Gear ratio
Motor typeDC motor

1

1

2401:81–

DC gear motor

2-phase stepper
motorOperating voltage

0 to ±24

0 to ±1224VMotor power

21

4

5.4

W

Reference and limit switches

Optical

Optical

OpticalnominalMiscellaneous
Operating temperature range–20 to 65–20 to 65–20 to 65

Material

Aluminum, steel

Aluminum, steel

Aluminum, steel

Mass

0.9 / 0.9 / 1.1

0.89 / 0.9 / 1.09

0.99 / 1.1 / 1.19

Connector

HD Sub-D 26 (m)HD Sub-D 26 (m)HD Sub-D 26 (m)Recommended controller/
driver

C-863 (singleaxis), C-884(up to 4 axes)

C-863 (singleaxis), C-884(up to 4 axes)

C-663.11(single axis)°Ckg

Ask about custom designs!
All cables required for operation with the recommended controller are included in the scope of delivery.
The cable length is 3 m. Cable for connecting to other controllers can be ordered as accessory.
* Travel ranges of the variants: L-406.1: 26 mm (1), L-406.2: 52 mm (2), L-406.4: 102 mm (4).
** 200 full steps/rev.

L-406 2/4

W W W. P I . W S

L-406 with DC gear motor, dimensions in mm

30
30

40
40

34
34

33 H7x1,5/3
H7x1,5/3(2x)
(2x)

22xx

EE

44 H7x5/8
H7x5/8

DD

CC

5,3
5,3

30
30

36,3
36,3

65
65

88
4,5
4,5

34
34
50
50
BB

L-406.10DG10
L-406.10DG10
L-406.20DG10
L-406.20DG10
L-406.40DG10
L-406.40DG10

AA
55,5
55,5
68,5
68,5
93,5
93,5

BB
-100
100
150
150

CC
73,5
73,5
73,5
73,5
73,5
73,5

L-406 3/4

W W W. P I . W S

DD
132
132
158
158
208
208

EE
62,5
62,5
75,5
75,5
75,5
75,5

65
65

50
50
31
31

AA

L-406 with stepper motor, dimensions in mm

3 H7x1,5/3 (2x)
3 H7x1,5/3 (2x)

30

40

40

30

E

4 H7x5/8 (2x)E

4 H7x5/8 (2x)
C

D

C

65

D

5,3

30

8
4,5

30

8
4,5

5,3

36,8

36,8

65

A

65

34

65

34

50
31

50
31

A

50
B

50
B

L-406.10SD00
A
L-406.20SD00
L-406.10SD00 L-406.40SD00
55,5L-406.20SD00
68,5
L-406.40SD00
93,5

M4 5 (4 x)
M4 5 (4 x)
M6 12 (2 x)

3

H7

E
62,5
75,5
75,5

6 (4 x)M4 12 (2 x)

30
50
60

Detail drawing of the sled of the L-406,
dimensions in mm

A
B
C
D
55,5
82
132
B 68,5 C 100 D 82 E 158- 93,5 82 150 132 82 62,5 208
100
82
158
75,5
150
82
208
75,5

15
34
50
L-406 4/4

W W W. P I . W S

L-509 Precision Linear Stage
Compact Design, for Loads to 10 kg

n T ravel ranges from 26 to 102 mm(1‘‘ to 4‘‘)nRepeatability to 0.1 µm

n O ptional with Direct Measuring

Linear Encodern E
 fficient ActiveDrive DC servo motor,

Stepper Motor or DC Gear Motorn D
 irection-sensing reference pointswitchnIntegrated optical limit switches

Reference-class linear stage

Position measurement

High travel accuracy and load capacity due to crossed roller
guides. Precision ball screw with 1 mm pitch. Compact design.
Stress-relieved aluminum base for highest stability. Optical limit
switches. Travel ranges of the variants: L-509.1: 26 mm (1’’),
L-509.2: 52 mm (2’’), L-509.4: 102 mm (4’’).

n I ntegrated rotary encoder on the motor shaft (variants with

Drive types
n . xxAD variant: ActiveDrive DC motor for high velocity:

Control via pulse-width-modulated (PWM) signals, theoperating voltage is attained via an amplifier integrated
in the motor housing.
n x
 xDG variant: DC servo motor with gearhead for hightorques and resolution at low motor powern . xxSD variant: 2-phase stepper motor for low velocityn L aterally mounted linear encoder. Direct position measure-ment of the motion platform without in-fluence on thepositioning precision by mechanical play or hysteresis in
the drivetrain
Min. incremental motion and slow motion
In conjunction with the SMC Hydra controller, versions with stepper motor and integrated linear encoder (L-509.xASD00) achieve
repeatable minimum incremental motion in the range of thesensor resolution. The same configuration attains constant low
velocities of a few sensor increments per second.
Fields of applicationand high resolution
Noncontact limit switches. Noncontact optical reference pointswitch with direction sensing in the middle of the travel range.

L-511 and L-509 precision stages canbe combined without adapter plate formulti-axis positioning on several axes

DC gear motor).

Precision positioning in industry and research, high duty cycles.

Multi-axis set-up with L-511(horizontal) and L-509 (vertical)
precision stages

L-509 1/6

W W W. P I . W S

L-509.x4AD00

L-509.x0AD10

L-509.x0DG10

L-509.xASD00

L-509.x0SD00

Unit

Tolerance

Linear stage
with ActiveDrive DC motor
and linear
encoder(direct position
measurement)

Linear stage
with ActiveDrive DC motor
and rotary
encoder

Linear stage
with DC gear
motor androtary encoder

Linear stage
with stepper
motor andlinear encoder(direct position measurement)

Linear stage
with stepper
motor

Travel range*

26 / 52 / 102

26 / 52 / 102

26 / 52 / 102

26 / 52 / 102

26 / 52 / 102

Integrated sensor

Linear encoder

Rotary encoder

Rotary encoder

Linear encoder

–

mm

max.

Sensor resolution
rotary encoder

–

16384

4096

–

–

cts./
rev.

Design resolution

0.05

0.06

0.008

0.001**

0.315***µm

typ.

Minimum incremental motion

0.2

0.8

0.1

0.01

0.315***µm

typ.

Unidirectional
repeatability

0.1

0.2

0.1

–

0.3

µm

typ.

Backlash

0.2

0.3

1

0.5

µm

typ.

Bidirectional
repeatability

±0.3

±0.5

Crosstalk, angularerror xry (pitch)±60 / ±90 / ±120

±60 / ±90 / ±120

±60 / ±90 / ±120

±60 / ±90 / ±120

±60 / ±90 / ±120

µrad

typ.

Crosstalk, angularerror xrz (yaw)±60 / ±90 / ±120

±60 / ±90 / ±120

±60 / ±90 / ±120

±60 / ±90 / ±120

±60 / ±90 / ±120

µrad

typ.

Max. velocity

50

50

3

20

20

mm/s

max.

Spindle pitch

1

1

1

1

1

mm

Gear ratio––

2401:81––

Load capacity

100

100

100

100

100

N

max.

Push/pull force

60

60

60

60

60

N

max.

Permissible
lateral force

50

50

50

50

50

N

max.

Holding force

15

15

60

60

60

N

max.

Motor TypeDC motor with
PWM control

DC motor with
PWM control

DC gear motor

2-phasestepper motor

2-phasestepper motor

Operating voltage

24

24

0 to ±122424Motor power

80

80

8.5

Reference andlimit switches

Optical

Optical

Optical

Optical

OpticalOperating temperature range

0 to 55–20 to 65–20 to 65

0 to 55–20 to 65

Material

Aluminum,steel

Aluminum,steel

Aluminum,steel

Aluminum,steel

Aluminum,
steel

Mass

1.4 / 1.6 / 1.9

1.4 / 1.6 / 1.9

1.4 / 1.6 / 1.9

1.4 / 1.6 / 1.9

1.4 / 1.6 / 1.9

Connector

Sub-D 15
(Motor andEncoder),
3 m cable incl.

Sub-D 15
(Motor andEncoder),
3 m cable incl.

HD Sub-D 26(motor androtary encoder) to Sub-D 15,
incl. 3 m cable

HD Sub-D 26(motor), Sub-D
9 (linearencoder), 3 m
cable set incl.

HD Sub-D 26(motor) to
Sub-D 15, 3 m
cable incl.

Recommended
controller/
driver

C-863(single-axis)
C-884(up to 4 axes)

C-863(single-axis)
C-884(up to 4 axes)

C-863(single-axis),C-884(up to 4 axes)

SMC Hydra(double-axis)

C-663.11(single axis)

Motion andpositioning

±0.2

µm

Mechanicalproperties

Drive properties

VW

nominalMiscellaneous°Ckg

All cables required for operation with the recommended controller are included in the scope of delivery.
Cables for connecting to other controllers can be ordered as accessory.
*
Travel ranges of the variants: L-509.1: 26 mm (1), L-509.2: 52 mm (2), L-509.4: 102 mm (4).
** Sin/cos analog signals with 1 Vpp, operation with SMC Hydra controller with maximum interpolation.
*** 200 full steps/rev., max. 1.2 A/phase. Motor resolution with C-663 stepper motor controller.
Ask about custom designs!

L-509 2/6

W W W. P I . W S

All information provided in this drawing is to be considered confidential, proprietaryand secret information. It is intended only for the use of the individual or entity to
All information provided
drawing
is to beorconsidered
confidential,
proprietaryor copy thiswhomin itthis
is sent.
Individual
entity agrees
to not disseminate
and secret information.
It is intended
only forthethanuse originallyof the individual
or without
entity tothe written consent of
information
to anyoneotherspecified
whom it is sent. Individual
or entity
PI miCos
GmbHagrees to not disseminate or copy thisinformation to anyone other than originally specified without the written consent of
PI miCos GmbH

H

1

1

25

L-509.10DG10
L-509.20DG10
L-509.40DG10
L-509.10DG10
L-509.20DG10
L-509.40DG10

2

2

A
157,3
166,8
191,8
A
157,3
166,8
191,8

3

3
4

B
100
100
150B
100
100
150

4

4

5

D

C
135,3
154,3
204,3
C
135,3
154,3
204,3

5

5

L-509 3/6

W W W. P I . W S

7

6

D

6

6

7

D

E

F

A
A

F

D
106
106
106D
106
106
106

H

7

7

8

35

3

6

35

2

5

34

8,5

1

4

34

8,5

43

3

83,5

22
1

B

22

2

83,5

25

1

43

All information provided in this drawing is to be considered confidential, proprietaryand secret information. It is intended only for the use of the individual or entity to
All information provided
in thisis to beorconsidered
confidential,
proprietaryor copy thiswhom
it is drawing
sent. Individual
entity agrees
to not disseminate
and secret information.
It is intended
only forthe thanuse ofthe individual
or entity
to the written consent of
information
to anyoneotheroriginallyspecified
without
whom it is sent. Individual
or entity
agrees to not disseminate or copy thisPI miCosGmbH
information to anyone other than originally specified without the written consent of
PI miCos GmbH

1
8
9

8

Genehmigt vonTechn. Referenz

Erstellt durch

10

A
9

X

X

10

A

L-509 versions with DC gear motor, dimensions in mm

C

B

C

4,5

C

8
4,5

C

8

M6

D

Techn.
Referenz 30.03.2015
Dokumentenart

Datum

Datum

10 (4x)

M4

Dokumentenart

Kundenzeichnung

Erstellt durch

20.10.2015 pmmmi
Kundenzeichnung

pmmmi

Name

20.10.2015 pmmmi

8Genehmigt von© by PI miCos GmbH

M4

M4(4x)(4x)M6 8 10

AllgemeintoleranzenM4

8 (4x)

E

50

75

B50

75

B

G

G

DIN ISO 2768 - f - H
WeAllgemeintoleranzen
L-509.XXDGXXDIN ISO 2768 - fL-509-H
Kundenzeichnung

Bezeichnung / Title

30.03.2015 pmmmi L-509.XXDGXX
L-509.XXDGXX

20.10.2015 pmmmiDokument-ID / Document-No.:

Name Artikel-ID
Bezeichnung/ Title/ Item-No.:

20.10.2015 pmmmi
Abgeleitet
v.: /TEMPLATE© by PI miCos GmbH
Artikel-ID
Item-No.: PIM VERKAUF

DOC-000351980
Kundenzeichnung L-50

Dokument-ID / Document-No.:

Abgeleitet v.: TEMPLATE PIM VERK

L-509.XXDGXX

DOC-000351980

All information provided in this drawing is to be considered confidential, proprietaryand secret information. It is intended only for the use of the individual or entity towhom it is sent. Individual or entity agrees to not disseminate or copy thisinformation
to thisanyoneotheristhan
specified
withoutproprietary
the written consent of
All information
provided in
drawing
to beoriginallyconsidered
confidential,
PI miCos GmbHand secret information.
It is intended only for the use of the individual or entity towhom it is sent. Individual or entity agrees to not disseminate or copy thisinformation to anyone other than originally specified without the written consent of
PI miCos GmbH

G

H

H

1

1

2

2

L-509.10SD00
L-509.1ASD00
L-509.10SD00
L-509.20SD00
L-509.1ASD00
L-509.2ASD00
L-509.20SD00
L-509.40SD00
L-509.2ASD00
L-509.4ASD00
L-509.40SD00
L-509.4ASD00

F

A
129,3
129,3A
129,3
138,8
129,3
138,8
138,8
163,8
138,8
163,8
163,8
163,8

3

3

D

B
100
100 B
100100100100150100150100
150
150

4

4

C
135,3
135,3C
135,3
154,3
135,3
154,3
154,3
204,3
154,3
204,3
204,3
204,3

6

D
D

A
A

D
78
78 D
78 78
78 78
78 78
78 78
78
78

6

C

8

X

F

B

5

6

5

W W W. P I . W S

7

6

7

35

5
7

7

E
104,2E- 104,2104,2- 104,2
104,2
104,2

35

5

E

4

34

4

34

3

E

3

83,5

8,5

2

8,5

2

25

1 22

1

25 83,5

1

B

43
22

B

43

All information provided in this drawing is to be considered confidential, proprietaryand secret information. It is intended only for the use of the individual or entity towhom it is sent. Individual or entity agrees to not disseminate or copy thisinformation
to thisanyoneotheristhan
specified
withoutproprietary
the written consent of
All information
provided in
drawing
to beoriginallyconsidered
confidential,
PI miCos GmbHand secret information.
It is intended only for the use of the individual or entity towhom it is sent. Individual or entity agrees to not disseminate or copy thisinformation to anyone other than originally specified without the written consent of
PI miCos GmbH

1
8

8
9

9

D

X
M4

Erstellt durch

Genehmigt von

10

L-509 versions with stepper motor, dimensions in mm

Dokumentenart
Datum

10

A

A

C
C

4,5
4,5

C

8

Ansicht

M6
10 (4x)M4
M6 10 (4x)8 (4x)

M4

Dokumentenart

Kundenzeichnung

Bezeichnung / Title
Datum
Genehmigt von 28.10.2015 pmmmi
Techn. Referenz 10.04.2015 pmmmi
Artikel-ID / Item-No.:
Erstellt durch
01.09.2015 pmmmi

01.09.2015 pmmmi

Name

8

www.pimicos.com

8

www.pimicos.com

L-509 4/6

Abgeleitet v.:

8 (4x)

Ansic

M4
8 (4x

8 (4x)

E

E

50

75 50
25
34
50

75

B

G

DIN ISO 2768 - f - H

Allgemeintoleranzen

28.10.2015 pmmmi
Dokument-ID / Document-No.:

DOC-000344229

Abgeleitet v.:
Dokument-ID / Document-No.:

Artikel-ID / Item-No.:
DOC-000344229
L-509.XXSDXX

Werk

Techn. Referenz

DIN ISO 2768 - f - H
Kundenzeichnung
10.04.2015 pmmmi
L-509.XXSDXXNameAllgemeintoleranzen
Bezeichnung / Title

Kundenzeichnung L-509.X
L-509.XXSDXX

L-509.XXSDXXKundenzeichnung L-5

All information provided in this drawing is to be considered confidential, proprietaryand secret information. It is intended only for the use of the individual or entity towhom itAll
is sent.
Individual
or entity
agreesto notis disseminate
or copy
this
information
providedin thisdrawing
to be considered
confidential,
proprietary
information
anyoneother thanIt originallyspecifiedwrittenconsent
and tosecretinformation.
is intended
only forwithout
the usetheof theindividual
or ofentity to
PI miCoswhomGmbH
it is sent. Individual or entity agrees to not disseminate or copy thisinformation to anyone other than originally specified without the written consent of
PI miCos GmbH

H

1

1

2

G

L-509.10AD10
L-509.14AD00
L-509.10AD10
L-509.20AD10
L-509.14AD00
L-509.24AD00
L-509.20AD10
L-509.40AD10
L-509.24AD00
L-509.44AD00
L-509.40AD10
L-509.44AD00

2

3
4

F
F

A
157,3
A
157,3
157,3
166,8
157,3
166,8
166,8
191,8
166,8
191,8
191,8
191,8
4

B
B100
100
100
100
100
100
100
150
100
150
150
150

3

4

5
5

4

6

X

6

D
D

A
A

C
135,3
C
135,3
135,3
154,3
135,3
154,3
154,3
204,3
154,3
204,3
204,3
204,3

5

5

L-509 5/6

W W W. P I . W S

6

7

D
D106
106
106
106
106
106
106
106
106
106
106
106

7

C

X

E

E
E 104,2
104,2104,2
104,2104,2
104,2

H

6

7

7

8

8

35

3

34

3

35

8,5

2

34

8,5

2

E

1

43
1

25
25
83,5
83,5
E

1

43

B

18,4
18,4

All information provided in this drawing is to be considered confidential, proprietaryand secret information. It is intended only for the use of the individual or entity towhom itAll
is sent.
Individual
or entity
agreesto notis disseminate
or copy
this
information
providedin thisdrawing
to be considered
confidential,
proprietary
information
anyoneother thanIt originallyspecifiedwrittenconsent
and tosecretinformation.
is intended
only forwithout
the usetheof theindividual
or ofentity to
PI miCoswhomGmbH
it is sent. Individual or entity agrees to not disseminate or copy thisinformation to anyone other than originally specified without the written consent of
PI miCos GmbH

1
8
8
9
9

D

D

Techn. Referenz

Genehmigt von

10

Datum

Kundenzeichnung© by PI miCos GmbH10

L-509 versions with ActiveDrive DC motor, dimensions in mm

A
A

C
C

B

4,5
4,58
8

C

M6
10 (4x)M6
10 (4x)M48 (4x)M48 (4x)

Dokumentenart

Dokumentenart

Kundenzeichnung

Name

Name
Bezeichnung / Title
Datum
Erstellt durch
05.04.2016 pmmmi
Techn. Referenz 11.12.2015 pmmmi
Genehmigt von 05.04.2016 pmmmi
Erstellt durch
05.04.2016 pmmmi
Artikel-ID / Item-No.:05.04.2016 pmmmi© by PI miCos GmbH

Abgeleitet v.:

M4

E

50
5075
75 B

B

G

Allgemeintoleranzen

DIN ISO 2768

Allgemeintoleranzen

11.12.2015 pmmmi/ Title - f DINBezeichnung
ISO 2768
L-509.XXADXX

L-509.XXADXXKundenzeichnu

Artikel-ID / Item-No.:
Dokument-ID / Document

Kundenzeichnung
L-509.XXADXX

L-509.XXADXX
DOC-0003784

Dokument-ID / Document-No.:
Abgeleitet v.:

DOC-000378488

A

35

34

8,5

B

4,5
8
C

Ansicht X

Detail drawing of the sled of the L-509

10 (4x)M48 (4x)M48 (4x)4 H7

6 (2x)
D

34
50

83,5

25

E

M6

E

25
34
50
F

Direction of the axes and torques
for linear stages
G

E
104,2
104,2
104,2

Dokumentenart

Allgemeintoleranzen

Kundenzeichnung
Datum

Name

Techn. Referenz

11.12.2015 pmmmi

Erstellt durch

05.04.2016 pmmmi

Genehmigt von05.04.2016 pmmmi

Werkstückkanten

DIN ISO 2768 - f - H

-0,3
-0,1

+0,2
0,0

Gewicht in Kg

1.5495AbmessungenWerkstoffvgl. DIN ISO 13715---

Bezeichnung / Title

HalbzeugL-509.XXADXXOberfläche

Kundenzeichnung L-509.XXADXX---Artikel-ID / Item-No.:Darstellung

Einheitmm

L-509.XXADXX
Dokument-ID / Document-No.:

DOC-000378488© by PI miCos GmbH
7

Abgeleitet v.:

Versiongültig bis

00.000

FOREVER

MaßstabFormatSprache

Blatt

1:1

A2

DE

1/1

Nachfolger f.:

8

L-509 6/6

W W W. P I . W S

L-511 High-Precision Linear Stage
High Travel AccuracynTravel ranges to 155 mm (6‘‘)

n O
 ptional linear encoder for direct

position measurementn E
 fficient ActiveDrive DC servo motor,

Stepper Motor or DC Gear Motorn D
 irection-sensing reference pointswitchReference-class linear stage

Position measurement

Recirculating ball bearings for high travel accuracy and load
capacity. Precision ball screw with 2 mm pitch. Stress-relieved
aluminum base for highest stability. Travel range of the variants:
L-511.2: 52 mm (2), L-511.4: 102 mm (4), L-511.6: 155 mm (6).

n I ntegrated rotary encoder on the motor shaft (variants with

Drive types
n . xxAD variant: ActiveDrive DC motor for high velocity:

Control via pulse-width-modulated (PWM) signals, theoperating voltage is attained via an amplifier integrated
in the motor housing.
n . xxDG variant: DC servo motor with gearhead for hightorques and resolution at low motor powern . xxSD variant: 2-phase stepper motor for low velocity

and high resolution

measurement of the motion platform without influence on
the positioning precision by mechanical play or hysteresis in
the drivetrain
Minimum incremental motion and slow motion
In conjunction with the SMC Hydra controller, versions with stepper motor and integrated linear encoder (L-511.xASD00) achieve
repeatable minimum incremental motion in the range of thesensor resolution. The same configuration attains constant low
velocities of a few sensor increments per second.
Fields of application

Noncontact limit switches. Noncontact optical reference pointswitch with direction sensing in the middle of the travel range.

L-511 and L-509 precision stages canbe combined without adapter plate formulti-axis positioning on several axes

DC gear motor)n I ntegrated linear encoder, centrally installed. Direct position

Precision positioning in industry and research, high duty cycles.

Multi-axis set-up with L-511(horizontal) and L-509 (vertical)
precision stages

L-511 1/6

W W W. P I . W S

L-511.x4AD00

L-511.x0AD10

L-511.x0DG10

L-511.xASD00

L-511.x0SD00

Linear stage
with ActiveDrive DC motor
and linear
encoder (direct
position measurement)

Linear stage
with ActiveDrive DC motor
and rotary
encoder

Linear stage
with DC gear
motor androtary encoder

Linear stage
with stepper
motor andlinear encoder(direct position
measurement)

Linear stage
with stepper
motor

X

X

X

X

X

Travel range*

52 / 102 / 155

52 / 102 / 155

52 / 102 / 155

52 / 102 / 155

52 / 102 / 155

Integrated sensor

Linear encoder

Rotary encoder

Rotary encoder

Linear encoder–

Sensor resolution
rotary encoder

–

16384

4096

–

–

cts./
rev.

Design resolution

0.06

0.06

0.01640.001**

0.625***µm

Minimum incremental motion

0.15

0.4

0.1

0.2

0.625***µm

typ.

Unidirectional
repeatability

0.1

0.2

0.2

0.1

0.6

µm

typ.

Backlash

0.2

0.3

1

1

µm

typ.

Bidirectional
repeatability

±0.2

±1.25

µm

typ.

Crosstalk, angularerror xry (pitch)±40 / ±60 / ±70±40 / ±60 / ±70±40 / ±60 / ±70±40 / ±60 / ±70±40 / ±60 / ±70µradCrosstalk, angularerror xrz (yaw)

±40

±40

±40

±40

±40

µrad

Max. velocity

90

90

6

45

45

mm/s

Spindle pitch

2

2

2

2

2

mm

Gear ratio––

2401:81––

Load capacity

500

500

500

500

500

N

max.

Push/pull force

100

100

100

100

100

N

max.

Permissible
lateral force

250

250

250

250

250

N

max.

Holding force

10

10

20

40

40

N

max.

Motor TypeDC motor with
PWM control

DC motor with
PWM control

DC gear motor

2-phasestepper motor

2-phasestepper motor

Operating voltage

24 (PWM)

24 (PWM)

0 to ±122424Motor power

80

80

8.5

Reference andlimit switches

Optical

Optical

Optical

Optical

OpticalOperating temperature range

0 to 55–20 to 65–20 to 65

0 to 55–20 to 65

Material

Aluminum,steel

Aluminum,steel

Aluminum,steel

Aluminum,steel

Aluminum,
steel

Mass

2.5 / 2.9 / 3.3

2.5 / 2.9 / 3.3

2.3 / 2.7 / 3.1

2.5 / 2.9 / 3.3

2.5 / 2.9 / 3.3

Connector

Sub-D 15
(Motor andEncoder), 3 m
cable incl.

Sub-D 15
(Motor andEncoder), 3 m
cable incl.

HD Sub-D 26(motor and rotary encoder),3 m cable incl.
(HD Sub-D 26
to Sub-D 15)

HD Sub-D
26 (motor),
Sub-D 9 (linear
en-coder), 3 m
cable set incl.

HD Sub-D 26(motor), 3 m
cable incl. (HDSub-D 26 to
Sub-D 15)

Recommended
controllers

C-863(single axis)
C-884(up to 4 axes)

C-863(single axis)
C-884(up to 4 axes)

C-863(single axis)
C-884(up to 4 axes)

SMC Hydra
motioncontroller(double axis)

C-663(single axis)

Motion axes

Unit

Tolerance

Motion andpositioning

±0.2

mm

Mechanicalproperties

Drive properties

VW

nomialMiscellaneous*
Travel range of the variants: L-511.2: 52 mm (2), L-511.4: 102 mm (4), L-511.6: 155 mm (6).
** Sin/cos analog signals with 1 Vpp, operation with SMC Hydra controller with maximum interpolation.
*** 200 full steps/rev., max. 1.2 A/phase.

°C

kg

±5 %

All cables required for operation with the recommended
controller are included in the scope of delivery.
Ask about custom designs!

L-511 2/6

W W W. P I . W S

All information provided in this drawing is to be considered confidential, proprietaryand secret information. It is intended only for the use of the individual or entity towhom it is sent. Individual or entity agrees to not disseminate or copy thisinformation to anyone other than originally specified without the written consent of
PI miCos GmbH

1

6

0,7

D

42,7
21,7

All information provided in this drawing is to be considered confidential, proprietaryand secret information. It is intended only for the use of the individual or entity towhom it is sent. Individual or entity agrees to not disseminate or copy thisinformation to anyone other than originally specified without the written consent of
PI miCos GmbH

L-511 versions with DC gear motor, dimensions in mm

1
2

C

H

2
3

L-511.20DG10
L-511.40DG10
L-511.60DG10

3
4

A
186
211
261

4
5

B
250
6

D

A

C
210
260
360

5

L-511 3/6

W W W. P I . W S

6

7

100
4

7

8

H7

6,6

X

D
131
131
131

8

9

A

6 (2x)

B

110
C

M6
7 (10x)M6
7 (4x)M4
7 (4x)M6
7 (4x)

M4

E

4

3

H7

H7

Datum

4

7 (4x)
5 (2x)

4 (2x)

F

100

B

G

Dokumentenart

Kundenzeichnung© by PI miCos GmbHDIN ISO 27

Allgemeintoleranz

Name

Bezeichnung / Tit

Techn. Referenz

15.11.2013 pmmmi

L-511.XXD

Erstellt durch

20.10.2015 pmmmi

Genehmigt von

20.10.2015 pmmmi

Artikel-ID / Item-No

Kundenzei

Dokument-ID / Doc

L-511.XXD

Abgeleitet v.:

DOC-0003

All information provided in this drawing is to be considered confidential, proprietaryand secret information. It is intended only for the use of the individual or entity towhom it is sent. Individual or entity agrees to not disseminate or copy thisinformation to anyone other than originally specified without the written consent of
PI miCos GmbH

H

100
110

D

1

6

0,7

42,7
21,7

All information provided in this drawing is to be considered confidential, proprietaryand secret information. It is intended only for the use of the individual or entity towhom it is sent. Individual or entity agrees to not disseminate or copy thisinformation to anyone other than originally specified without the written consent of
PI miCos GmbH

L-511 versions with stepper motor, dimensions in mm

1
2

L-511.20SD00
L-511.2ASD00
L-511.40SD00
L-511.4ASD00
L-511.60SD00
L-511.6ASD00

2
3

A
158
158
183
183
233
233

3
4

B
250
250

4
5

C
210
210
260
260
360
360

6

100

C

D

A

5

W W W. P I . W S

6

7

4
H7

7

8

D
103
103
103
103
103
103

9

6,6

X

E

M4
4

3

H7

H7

8

L-511 4/6

10A

6 (2x)

B

110
C

M6
7 (10x)M6
7 (4x)M4
7 (4x)M6
7 (4x)

Datum

www.pimicos.com

4

Dokumentenart

Kundenzeichnung

Techn. Referenz

15.11.2013 pmmmi

Erstellt durch

26.08.2015 pmmmi

Name

Genehmigt von

19.10.2015 pmmmi

Abgeleitet v.:

H75

7 (4x)
5 (2x)

4 (2x)

F

100

G

B

DIN ISO 2768 - f

Allgemeintoleranzen

L-511.XXSDXXBezeichnung / Title

Artikel-ID / Item-No.:

Kundenzeichnun

DOC-000343419

Dokument-ID / Document-N

L-511.XXSDXXAll information provided in this drawing is to be considered confidential, proprietaryand secret information. It is intended only for the use of the individual or entity towhom it is sent. Individual or entity agrees to not disseminate or copy thisinformation to anyone other than originally specified without the written consent of
PI miCos GmbH

1

100
110

6

0,7

D

42,7
18,1

All information provided in this drawing is to be considered confidential, proprietaryand secret information. It is intended only for the use of the individual or entity towhom it is sent. Individual or entity agrees to not disseminate or copy thisinformation to anyone other than originally specified without the written consent of
PI miCos GmbH

L-511 versions with ActiveDrive DC motor, dimensions in mm

1
2

H

2
3

L-511.20AD10
L-511.24AD00
L-511.40AD10
L-511.44AD00
L-511.60AD10
L-511.64AD00

3
4

A
186
186
211
211
261
261

4
5

B
250
250
6

C

D

A

C
210
210
260
260
360
360

5

L-511 5/6

W W W. P I . W S

6

7

100
4

7

H7
8

D
131
131
131
131
131
131

8

9

A

6 (2x)

B

110
C

6,6

X
M6
7 (10x)M6
7 (4x)M4
7 (4x)M6
7 (4x)

E

M4
4

3

H7

H7

Dokumentenart

Kundenzeichnung

Techn. Referenz

11.12.2015 pmmmi

Erstellt durch

23.03.2016 pmmmi

Datum

Name

Genehmigt von

23.03.2016 pmmmi© by PI miCos GmbH47 (4x)
5 (2x)

4 (2x)

F

100

B

G

DIN ISO 276

Allgemeintoleranzen

L-511.XXAD

Bezeichnung / Title

Artikel-ID / Item-No.:

Kundenzeich

Dokument-ID / Docum

Abgeleitet v.:

L-511.XXAD

DOC-000376

9

10

11

12

A

B

C

Detail drawing of the sled of the L-511

Ansicht X
4M6

7 (10x)M6

7 (4x)M4

7 (4x)M6

7 (4x)

4
100
110

3

5 (2x)45 (2x)H7

5 (2x)D

7 (4x)
H7
H7

30
40
50
100

M4

4

H7

H7

5 (2x)E

4 (2x)
Direction of the axes andtorques for linear stages

25
34
50
75
80
100

F

G

The L-511 reliably performs repeatable 20-nm steps with thelinear encoder and SMC Hydra motion controller

Dokumentenart

Allgemeintoleranzen

Kundenzeichnung
Datum

Name

Techn. Referenz

11.12.2015 pmmmi

Erstellt durch

23.03.2016 pmmmi

Genehmigt von

23.03.2016 pmmmi

Werkstückkanten

DIN ISO 2768 - f - H

-0,3
-0,1

+0,2
0,0

Gewicht in Kg

2.8142AbmessungenWerkstoffvgl. DIN ISO 13715---

Bezeichnung / Title

HalbzeugL-511.XXADXXOberfläche

Kundenzeichnung L-511.XXADXX---Artikel-ID / Item-No.:Darstellung

Einheitmm

L-511.XXADXX
Dokument-ID / Document-No.:

DOC-000376664© by PI miCos GmbH

Abgeleitet v.:

Versiongültig bis

00.000

FOREVER 1:1.5

MaßstabFormatSprache

Blatt

A2

DE

1/1

Nachfolger f.:

L-511 6/6

W W W. P I . W S

L-611 Precision Rotation Stage
High Travel AccuracynUnlimited travel rangenUltrahigh resolutionnMaximum velocity 200°/sn D
 irection-sensing reference

point switch

Reference-class rotation stage
High-precision positioning due to low-play preloaded worm gear.
Preloaded pivot bearings for high travel accuracy. Clear aperture with Ø 35 mm. Unlimited travel range in both directions ofrotation. Noncontact reference point switch. Compact multi-axis
positioning systems with L-511 linear stages and L-310 Z stages
possible. Vacuum versions available on request.
Versionsn L
 ow-vibration stepper motorn

DC motor with ActiveDriven

Additional high-resolution optical angle measuring system

Option: Measurement of the travel accuracy and positioning
accuracy
Individual measurement logs for wobble, axial, and radialcreep available on request. Please specify when ordering.

L-611 1/5

W W W. P I . W S

Direction of the axes
and torques for rotation stages

L-611.90SD

L-611.9ASD

L-611.90AD

Unit

Tolerance

With integrated
angle measuringsystemWith integrated
angle measuringsystemActive axes

L-611.94AD

θZ

θZ

θZ

θZ

Rotation range

>360

>360

>360

>360

Integrated sensor–

Angle measuring system

Rotary encoder

Angle measuring system

Design resolution

21.8 (0.00125)*0.17 (0.00001)**

0.35 (0.00002)

3.5 (0.0002)

0.035 (0.000002)µrad (°)

Minimum incremental
motion43.6 (0.0025)*
0.34 (0.00002)**

0.7 (0.00004)

35 (0.002)

0.7 (0.00004)µrad (°)

Motion and positioning°

typ.

Backlash

350 (0.02)–

350 (0.02)–µrad (°)

typ.

Unidirectional repeatability

35 (0.002)

3.5 (0.0002)

35 (0.002)

3.5 (0.0002)µrad (°)

typ.

Bidirectional repeatability–±3.5 (±0.0002)±175 (±0.01)±3.5 (±0.0002)µrad (°)

Wobble (bearings)

±15

±15

±15

±15

µrad

Flatness (bearings)

±1

±1

±1

±1

µm

Eccentricity (bearings)

±2.5

±2.5

±2.5

±2.5

µm

Velocity

50

50

200

200

°/s

Worm gear ratio

90:1

90:1

90:1

90:1

Motor resolution

200

200

–

–

max.

Mechanical properties
Full
steps/
rev ev.

Load capacity / axial force

100

100

100

100

N

max.

Permissible torque Mx
in θX, θY

40

40

40

40

Nm

max.

Permissible torque Mz in θz

3

3

3

3

Nm

max.

Tip/tilt stiffness of theplatform kα

30

30

30

30

µrad/Nm

Motor Type2-phase stepper
motor***

2-phase stepper
motor***

DC motor with
PWM control

DC motor with
PWM control

Reference point switch

Hall effect

Hall effect

Hall effect

Hall effect

Material

Aluminum,
black anodized,
stainless steel,
red bronze

Aluminum,
black anodized,
stainless steel,
red bronze

Aluminum,
black anodized,
stainless steel,
red bronze

Aluminum,
black anodized,
stainless steel,
red bronze

Mass

2.6

2.6

2.6

2.6

Recommended controllers /driversC-663.11
C-663.12(single axis)

SMC Hydra(double axis)

C-863

C-863

Drive properties

Miscellaneouskg*
with C-663.11 Mercury Step Controller** with C-663.12 Mercury Step Controller*** 200 full steps/rev., max. 1.2 A/phase
Specifications for vacuum versions can differ.

L-611 2/5

W W W. P I . W S

L-611.90SD rotation stage, dimensions in mm

L-611 3/5

W W W. P I . W S

L-611.9ASD rotation stage, dimensions in mm

L-611 4/5

W W W. P I . W S

L-611.90AD and L-611.94AD rotation stages, dimensions in mm

L-611 5/5

W W W. P I . W S

L-731 Precision XY stage
High Travel Accuracy and Stabilityn T
 ravel range 205 mm × 205 mm (8”)
n U
 nidirectional repeatability to 0.1 µm
n V elocity to 90 mm/sn 2
 -phase stepper motors or DC motors
n I ncremental encoder with 10 nm

resolutionn R otary encoder with 20000 impulses/

revolutions

Direct position measurement with incremental encoder

Drive types

Noncontact optical encoders measure the actual position directlyat the motion platform with the greatest accuracy so that nonlinearity, mechanical play or elastic deformation have no influence on position measuring. Optical limit and reference pointswitches.

n 2
 -phase stepper motor for high torque even at low velocities

Crossed roller bearings
With crossed roller bearings, the point contact of the balls inball bearings is replaced by a line contact of the hardened rollers. Consequently, they are considerably stiffer and need lesspreload, which reduces friction and allows smoother running.
Crossed roller bearings are also distinguished by high guiding
accuracy and load capacity. Force-guided rolling element cages
prevent linear guide creeping.

and higher resolutionn D
 C motor for high velocity constancy, low vibration, andhigh velocities
Other travel ranges on request.
Application fields
Industry and research. Metrology, inspection, industrial microscopy

L-731 1/4

W W W. P I . W SStages with stepper motor

L-731.40SD

L-731.44SD

L-731.4ASD

XY stage with stepper
motor

XY stage with stepper
motor and linear
encoder (direct position
measurement)

XY stage with stepper
motor and linear
encoder (direct position
measurement)

Unit

Tolerance

Motion and positioning
Active axes

X, Y

X, Y

X, Y

Travel range

205 × 205

205 × 205

205 × 205

Integrated sensor–

Incremental linear­encoder with A/B­quadrature signal­transmission

Incremental linear­encoder with sin/cos
signal transmission

mmSensor resolution

–

10

10*

nm

Sensor signal period

–

–

20

µm

Minimum incremental motion

1.25**

0.05

0.05

µm

typ.

Unidirectional repeatability

0.5**

0.1

0.1

µm

typ.
typ.

Bidirectional repeatability

±5**

±0.5

±0.5

µm

Backlash

3

–

–

µm

Pitch

±75

±75

±75

µrad

typ.

Yaw

±75

±75

±75

µrad

typ.

Straightness / flatness

±3

±3

±3

µm

typ.

Velocity

45

45

45

mm/s

max.

Reference and limit switches

opticalopticalopticalMechanical properties
Load capacity

50

50

50

N

Permissible torque in θX, θY

125

125

125

N·m

Permissible torque in θZ

125

125

125

N·m

Moved mass in X

12

12

12

kg

Moved mass in Y

3.5

3.5

3.5

kg

Overall mass

15.5

15.5

15.5

kg

Guiding

Crossed roller guidewith anti-creep system

Crossed roller guidewith anti-creep system

Crossed roller guidewith anti-creep system

Drive properties
Motor Type2-phase stepper motor

2-phase stepper motor

2-phase stepper motor

Spindle pitch

2

2

2

mm

Operating voltage

24 – 48

24 – 48

24 – 48

V

Motor power

5

5

5

W
°C

nominalMiscellaneous
Operating temperature range

10 to 50

10 to 50

10 to 50

Humidity

20 to –90 % rel.,not condensing

20 to –90 % rel.,not condensing

20 to –90 % rel.,not condensing

Material

Aluminum,
black anodized

Aluminum,
black anodized

Aluminum,
black anodized

Connection

Motor connection:
2 × HD Sub-D 26 (m)Motor and sensor
connection:
2 × HD Sub-D 26 (m)Motor connection:
2 × HD Sub-D 26 (m)Sensor connection:
2 × Sub-D 15 (f)Recommended controller

2 × C-663 Mercury
Step Motion Controller,
SMC Hydra Motion
Controller for 2 axes
C-885 PIMotionMasterfor multi-axis controller
systems

2 × C-663 Mercury
Step motion controller
C-885 PIMotionMasterfor multi-axis controller
systems

SMC Hydra Motion
Controller for 2 axes

* with SMC Hydra. Other interpolation factors are available as an option.
** with C-663 Mercury Step.
All cables required for operation with the recommended controller are included in the scope of delivery.
Cable for connecting to other controllers can be ordered as accessory.

L-731 2/4

W W W. P I . W SStages with DC motor

L-731.093132

L-731.093112

L-731.093111

XY stage with DC motor
and rotary encoder

XY stage with DC motor
and linear encoder(direct position measurement)

XY stage with DC motor
and linear encoder(direct position measurement)

Unit

Tolerance

Motion and positioning
Active axes

X, Y

X, Y

X, Y

Travel range

205 × 205

205 × 205

205 × 205

Integrated sensor

Rotary encoder

Incremental linear encoder with A/B quadrature
signal transmission

Incremental linear encoder with sin/cos signaltransmission

10

10*

nm

20000

–

–

Cts./
rev.

Sensor resolution
Sensor resolution

mmSensor signal period

–

–

20

µm

Minimum incremental motion

0.8

1

0.1

µm

typ.

Unidirectional repeatability

0.5

0.2

0.1

µm

typ.
typ.

Bidirectional repeatability

±5

±0.5

±0.5

µm

Backlash

3

–

–

µm

Pitch

±75

±75

±75

µrad

typ.

Yaw

±75

±75

±75

µrad

typ.

Straightness / flatness

±3

±3

±3

µm

typ.

Velocity

90

50

50

mm/s

max.

Reference and limit switches

opticalopticalopticalMechanical properties
Load capacity

50

50

50

N

Permissible torque in θX, θY

125

125

125

N·m

Permissible torque in θZ

125

125

125

N·m

Moved mass in X

12

12

12

kg

Moved mass in Y

3.5

3.5

3.5

kg

Overall mass

16

16

16

kg

Guiding

Crossed roller guidewith anti-creep system

Crossed roller guidewith anti-creep system

Crossed roller guidewith anti-creep system

Drive properties
Motor TypeDC motor

DC motor

DC motor

Spindle pitch

2

2

2

mm

Operating voltage

24

24

24

V

Motor power

5

5

5

W
°C

Miscellaneous
Operating temperature range

10 to 50

10 to 50

10 to 50

Humidity

20 to –90 % rel.,not condensing

20 to –90 % rel.,not condensing

20 to –90 % rel.,not condensing

Material

Aluminum,
black anodized

Aluminum,
black anodized

Aluminum,
black anodized

Connection

Motor connection:
2 × HD Sub-D 26 (m)Motor and sensor­connection:
2 × HD Sub-D 26 (m)Motor connection:
2 × HD Sub-D 26 (m)Sensor connection:
2 × Sub-D 15 (f)Recommended controller

2 × C-863 Mercury
motion controller, SMC
Hydra motion controller
for 2 axes
C-885 PIMotionMasterfor multi-axis controller
systems
C-884 four-channel
motion controller

2 × C-863 Mercury
motion controller, SMC
Hydra motion controller
for 2 axes
C-885 PIMotionMasterfor multi-axis controller
systems
C-884 four-channel
motion controller

SMC Hydra Motion
Controller for 2 axes

* with SMC Hydra. Other interpolation factors are available as an option.
All cables required for operation with the recommended controller are included in the scope of delivery.
Cable for connecting to other controllers can be ordered as accessory.

L-731 3/4

W W W. P I . W S

nominalL-731, dimensions in mm

L-731 4/4

W W W. P I . W S

C-663.12
Mercury Step Stepper Motor Controller, 1 Axis
For Closed-Loop and Open-Loop Operation, HD Sub-D 26, 48 Vn H
 igh microstep resolutionn O perating voltage up to 48 Vn O pen-loop and closed-loop operationof 2-phase stepper motors
n S
 upport for external sensors
n D aisy chain networking

Mercury Step controller for 2-phase stepper motors

Extensive functions, software support

1 Axis. Microstep resolution: 1/2048 full step. Open-loop andclosed-loop operation. Point-to-point motion, trapezoidal ­velocity
profile. Networkable via daisy chain.

Powerful macro command language. Nonvolatile macro s­ torage,e.g., for stand-alone operation with autostart macro. Data
­recorder. ID chip detection for fast startup. PID controller, para­
meter changing during operation Extensive software ­support,e.g., for LabVIEW, C, C++, MATLAB, python. PIMikroMove user
software.

Encoder inputs
Differential signal transmission for digital (A/B) encoder signals. TTL inputs for limit and reference point switches. Input for
RS-422 signals for index switch.
Interfaces

Scope of delivery incl. 48-V wide-range-input power supply,
USB cable, RS-232 cable, network cable for daisy chain and plug
adapter for stages with Sub-D 15 connection.

USB and RS-232 for commanding. I/O lines (analog/digital) for
automation. Interface for analog joystick.

C-663.12 1/2

W W W. P I . W S

C-663.12
Function

Mercury Step stepper motor controller

Drive types

2-phase stepper motor

Axes

1

Supported functions

Point-to-point motion. Startup macro. Data recorder for recording operating
data such as velocity, position or position error.
Internal safety circuitry: Watchdog timer. ID Chip detection (for future use).

Motion and control
Controller type

PID, parameter changing during operation

Servo cycle time

50 µs

Dynamics profile

Trapezoidal velocity profile

Microstep resolution

1/2048 full step

Encoder input

A/B quadrature, TTL, RS-422; 60 MHz

Limit switches

2 × TTL, programmable

Reference point switches

1 × TTL, programmable

Index switch

1 × RS-422 for index pulse

Stall detection

Automatic motor stop when a programmable position error is exceeded(only in conjunction with sensor)

Electrical properties
Operating voltage

24 to 48 V DC from external power supply (48 V DC power supply in scope of delivery)

Max. output voltage*

0 V to operating voltage, for direct control of stepper motors

Power consumption, full load

48 W (max.)

Power consumption, no load

3W

Max. output power (<2 ms)

100 W

Average output power<48 W

Current limitation
per motor phase

2.5 AInterfaces and operation
Communication interfaces

USB, RS-232

Motor / sensor connection

HD Sub-D 26 (f)Controller network

Up to 16 units on a single interface**

I/O lines

4 analog / digital inputs (0 to 5 V / TTL), 4 digital outputs (TTL)

Command set

PI General Command Set (GCS)

User software

PIMikroMove

Application programming
interfaces

API for C / C++ / C# / VB.NET / MATLAB / python, drivers for LabVIEW

Manual control

Joystick, Y-cable for 2-D motion, pushbutton box

Miscellaneous
Operating temperature range

5 to 50 °C (temperature protection switches off at excessively high temperatures)

Mass

0.48 kg

Dimensions

130 mm × 76 mm × 40 mm (incl. mounting rails)* Depending on the power supply used** 16 units with USB; 6 units with RS-232

C-663.12 2/2

W W W. P I . W S

C-863 Mercury Servo Controller
1 Axis, for DC Motors and Brushless DC Motorsn H
 igh-speed encoder input to 60 MHz
n P
 owerful macro programming language,e.g., for stand-alone operationn N onvolatile EEPROM for macros and­parametersn D
 ata recordern D aisy chain networkingn C onnection for joystick

Digital motion controller for DC servo motors

Extensive functions, software support

1 axis. Motion control of PI positioning systems with DC motor:
Direct motor control; PWM control for fast PI stages with integrated ActiveDrive amplifiers or with brushless motors and­integrated block commutation. PID controller. Supports motor
brake.

Powerful macro command language. Nonvolatile macro s­ torage,e.g., for stand-alone operation with autostart macro. Data
­recorder. PID controller, parameter changing during operation.
Extensive software support, e.g., for LabVIEW, C, C++, MATLAB,
python. PIMikroMove user software.

Interfaces and communication
USB and RS-232 interface for commanding. A/B quadrature
encoder input. TTL inputs for limit and reference point s­ witches.
I/O lines (analog/digital) for automation. Interface for analog­joystick. Daisy chain networking for up to 16 axes operated via acommon computer interface.

C-863 1/2

W W W. P I . W S

C-863.11
Function

DC motor control, servo control

Axes

1

Supported functions

Point-to-point motion. Startup macro. Data recorder for recording
operating data such as motor voltage, velocity, position or position error.
Internal safety circuitry: Watchdog timer.

Motion and control
Controller type

PID controller, parameter changing during operation

Servo cycle time

50 µs

Profile generator

Trapezoidal velocity profile

Encoder input

A/B quadrature single-ended or differential TTL signal acc. to RS-422; 60 MHz

Stall detection

Automatic motor stop when a programmable position error is exceeded

Limit switches

2 × TTL (programmable polarity)

Reference point switch

1 × TTL

Motor brake

1 × TTL, can be switched by software

Electrical properties
Max. output voltage*

0 to ±15 V for direct control of DC motor

Max. output power

30 W

Current limitation

2A

Interfaces and operation
Interface / communication

USB; RS-232, Sub-D 9 (m)Motor connector

Sub-D 15 (f)Controller network

Up to 16 units** on a single interface

I/O lines

4 analog / digital inputs, 4 digital outputs (TTL), 5 V TTL

Command set

PI General Command Set (GCS)

User software

PIMikroMove

Software drivers

API for C / C++ / C# / VB.NET / MATLAB / python, drivers for LabVIEW

Manual control

Optional: Pushbutton box, joystick (for 2 axes), Y cable for 2-D motion

Miscellaneous
Operating voltage

15 to 30 V, in the scope of delivery: external power supply 15 V / 2 A

Max. current consumption

80 mA plus motor current (max. 3 A)

Operating temperature range

5 to 50 °C

Mass

0.3 kgDimensions

130 mm × 76 mm × 40 mm (incl. mounting rails)* The output voltage depends on the connected power supply.
** 16 units with USB; 6 units with RS-232.

C-863 2/2

W W W. P I . W S

C-884.4DC/C-884.6DC
Motion Controllers for DC motors, 4 or 6 Axes
For Positioners with Closed-Loop DC Motor, USB, RS-232, TCP/IP, SPI, I/O, Joystickn P ID servo control with dynamic

parameter switchingn P owerful macro programming language,e.g., for stand-alone operationn D ata recordern I ntegrated interfaces: USB, RS-232,

Ethernet, SPI, I/O, joystickn T rajectory support for 1 or 2-D motion

patterns

Digital motion controller for DC servo motors

Interfaces and communication

4 or 6 axes. Dual-core architecture for increased performanceand flexibility by separating command processing and position ­control. Simple adaptation / extension possible for OEM­products. Motion control of PI positioning systems with DC
motors: Direct motor control, PWM control for PI positioning
stages with integrated ActiveDrive amplifiers or integrated blockcommutation (brushless motors). Supports motor brake.

Interfaces: TCP/IP, USB and RS-232 for commands. A/B quadrature encoder input. TTL inputs for limit and reference pointswitches. I/O lines (analog/digital) for automation. USB interface
for human interface devices.

Motion profiles
Point-to-point, trapezoidal velocity profile. User-definable trajectories (e.g., circles, sine curves) from externally fed points.

Extensive functions, software support
Powerful macro command language. Nonvolatile macro storage,e.g., for stand-alone operation with autostart macro. Data recorder. ID chip detection for fast startup. PID controller, parameterchanging during operation. Extensive software support, e.g., for
LabVIEW, C, C++, MATLAB, python. PIMikroMove user software.

C-884.4DC/C-884.6DC 1/2

W W W. P I . W S

C-884.4DC / C-884.6DC
Function

Position control for closed-loop DC motors

Processor

Dual core architecture. Controller on a DSP core, with extendablecommand interpreter in an ARM core under Linux

Axes

C-884.4DC: 4 / C-884.6DC: 6

Supported functions

Linear vector motion. Point-to-point motion. User-definable trajectories.
Startup macro. PI Python. Data recorder for recording operating data suchas motor voltage, velocity, position or position error. ID Chip detection.

Motion and control
Controller type

PID controller, parameter changing during operation

Servo cycle time

100 µsProfile generator

Trapezoidal velocity profile

Encoder input

A/B quadrature (TTL differential according to RS-422), 50 MHz; BiSS interface

Stall detection

Automatic motor stop when a programmable position error is exceeded

Limit switches

2 × TTL per axis (programmable polarity)

Reference point switch

1 × TTL per axis

Motor brake

1 × TTL per axis, can be switched per software

Electrical properties
Max. output voltage*

24 V

Max. output power

240 W

Current limitation

2.5 A per axis

Interfaces and operation
Communication interfaces

TCP/IP: RJ45/Ethernet; USB: Mini-USB type B; RS-232: Sub-D 9 (m); SPI: DisplayPort

Motor connector

Sub-D 15 (f)I/O lines

4 analog inputs (–10 to 10 V), 4 digital outputs (5 V TTL)
4 digital outputs (5 V TTL)

Command set

PI General Command Set (GCS)

User software

PIMikroMove

Application programming
interfaces

API for C / C++ / C# / VB.NET / MATLAB / python, drivers for LabVIEW

Manual control

USB interface for HID-compliant devices

Miscellaneous
Operating voltage

External power supply 24 V / 5 A (120 W) included in the scope of delivery

Max. current consumption

C-884.4DC: 11 A / C-884.6DC: 16 A

Current consumption, no load

500 mA

Operating temperature range

5 to 50 °C

Mass

C-884.4DC: 1.77 kg / C-884.6DC: 1.97 kg

Dimensions

312 mm × 153.4 mm × 59.2 mm (incl. mounting rails)* The output voltage depends on the connected power supply.

C-884.4DC/C-884.6DC 2/2

W W W. P I . W S

SMC Hydra Motion Controller
For Electromagnetic Motors

n 2 -D vector motion with linear inter-

polation, independent single-axis
motionsn

Digital inputs and outputsnOptional: Encoder-based trigger outputn O ptional: Position capture input: Position

detection in real time via digital inputnOptional: Dynamic position correction

Universal digital motion controller

Interfaces

For DC servo and brushless DC motors (BLDC), linear and torquemotors (2 / 3 phases), 2-phase stepper motors. 24 V / 48 VDC
output voltage, up to 200 W power per channel.

Commanding via TCP/IP, RS-232. RM version only: USB as well.
Manual operation with joystick via CAN bus (accessory). Digital inputs and outputs for automation. Opto-decoupled inputs,
4 analog outputs

Maximum output current 10 A per phase (effective). Sine-commutated operation. Automatic detection of the motor phase.
PID controller for position and velocity. Servo frequency 4 kHz
Versionsn T
 T benchtop device with integrated power supply,

2 channels
n C
 M compact version, 2 channels
n R
 M 19‘‘ rack unit with integrated power supply, 2 channels
n R
 M 19‘‘ rack unit with integrated power supply, 4 channels

Default optionsn D
 eltaStar and DeltaStar Eco encoder interface module: Re-quired to control position-controlled drives (rotary or linear
encoders). Differential signal transmission for digital (A/B) or
analog (sin/cos) encoder signals, inputs for limit switch signals. Please specify when ordering.
	Trigger options with DeltaStar: Trigger outputs, position capture input (position detection in real time via digital input)
Trigger options with DeltaStar Eco. Trigger outputs
n D
 ynamic Position Correction: Position deviations for a select-

Extensive functionality
Extensive software support, e.g., for LabVIEW, dynamic libraries
for Windows and Linuxed configuration of linear or rotation stages are determinedwith a highly accurate measuring system and saved in a tableof corrections in the controller. Correction is also dynamic.
Single-axis mapping, only available as factory default in conjunction with a PI positioning system. Please specify whenordering.

SMC HYDRA 1/3

W W W. P I . W S

SMC Hydra
Function

Motion controller for electromagnetic motors
Hydra TT (benchtop device)
Hydra CM (compact device)
Hydra RM (19” rack unit)

Motor channels

Hydra TT: 2
Hydra CM: 2
Hydra RM: 2 / 4

Sensor channels

Hydra TT: 2
Hydra CM: 2
Hydra RM: 2 / 4

Motion and Control
Servo characteristics

PID controller, also adaptive for position and velocity as well as velocity
and acceleration feed-forward, parameter change on-the-fly

Servo frequency

4 kHz

Profile generator

Trapezoidal velocity profile, setting of maximum velocity and acceleration
2D vector control with linear interpolation

Encoder input

Analog signals (sin/cos) max. 150 kHz (line count)
Digital signals (A/B differential via RS-422) max. 4 MHz (line count)
Positioning range: ± 4.3*1012 mm / deg

Stall detection

Position error, peak current, I2t limit

Microsteps per full step

3000

Limit switches

2 per channel, 5 to 24 V (programmable polarity)
N/O contact / N/C contact; NPN / PNP

Reference point switch

Index signal of the encoder

Motor brake

1× per channel, TTL, configurable via software

Electrical properties
Maximum output voltage

24 V / 48 V

Maximum output power per channel

200 W

Maximum output current per channel

10 Arms

Interfaces and operation
Interface for communication

TCP/IP 10/100 Mbit, RS-232: Sub-D 9-pin (m), 9.6 to 115.2 kBaud
Hydra RM: USB as wellMotor connection per channel

Sub-D 15-pin (f)Sensor connection per channel

Sub-D 15-pin (f)I/O ports

6 inputs, opto decoupled, 5 – 24 V (2 each reserved per channel for limit switch)
Input for motor switch-off on all axes, opto decoupledOpen drain output (100 mA)
2 TTL outputs
4 analog outputs, 10-bit resolution, 0 to 3.3 V (not for Hydra TT)
With DeltaStar interface as default option: Fast trigger output, max. 400 kHz,equidistant or from freely definable table (max. 3000 axis positions)
Position capture input, max. 4 kHz (>3,000,000 axis positions)With the default DeltaStar Eco interface option: Trigger output, 2 kHz, equidistant,jitter 10-30 µs

Command set

Venus-3 ASCII interpreter
Dynamic library for PI General Command Set (GCS)

User software

Venus-3 demo program LabVIEW (source code & executable)
Terminal program (Venus-3 DLL)PIMikroMove via dynamic libraries for Windows

Software drivers

LabVIEW drivers, dynamic libraries for Windows and Linux (GCS)
GCS2 DLL 32/64-bit
Venus3 DLL 32/64-bit / .net wrapper DLL
incl. example source code

Supported functions

Linear vector motion, independent point-to-point motions, automatic detectionof the motor phase

Manual operation

Joystick via CAN bus (accessory)Ó

Switch-off via external switch, motor driver overload protection, motor overheat
protection (I2t), system overcurrent protection

SMC HYDRA 2/3

W W W. P I . W S

SMC Hydra
Miscellaneous
Operating voltage

Hydra TT: 90 - 260 V, integrated wide-range-input power supply
Hydra CM: 24 V / 48 V, external power supply (not in scope of delivery)
Hydra RM: 90 – 260 V, integrated wide-range-input power supply

Max. power consumption

Hydra TT: 300 W
Hydra CM: 120 W
Hydra RM: 1000 W

Max. current consumption

11 A

Operating temperature range

10 to 40 °C

WeightHydra TT: 2.65 kg
Hydra CM: 0.45 kg
Hydra RM: 6 kg

Dimensions

Hydra TT: 225 mm x 515 mm x 56 mm
Hydra CM: 76 mm x 156 mm x 56 mm
Hydra RM: 84 HP, 2 RU, depth 310 mm

SMC HYDRA 3/3

W W W. P I . W S

Engineering Design Expertise and Customization

Simulation of the magnetic field B of a reluctance motor. This drive principle
allows a higher power density than can be achieved with voice coil drives andmakes for most compact motors with maximum force generation

Unique Technological BreadthCore Technologies

The technological diversity of the PI Group is unrivalled all over
the world. PI develops, manufactures, and qualifies all its coretechnologies itself. PI is therefore not dependent on components
available on the market. That puts PI in a position to offer its customers the most advanced products for motion and positioning
tasks – without technological restriction.

n I n-house manufacturing of piezo components and piezo

Customized Solutions
With this background, PI develops positioning solutions with
innovative drive technologies for high-tech applications worldwide. PI covers the whole motion range from finger-tip sized
nanopositioners to large-scale stages with long travel ranges,
through their plethora of different drive and guiding systems.

actuatorsnMagnetic direct drives: Linear motors and voice coiln

Air bearings, magnetic, and flexure guidesnComprehensive range of piezo motor technologiesnNanometrology sensors

n P arallel-kinematic systems for positioning in six axes

(hexapods)nMotion control technologynSoftwareW W W. P I . W SGlobal Service and After-Sales

On-site training is key to optimize and maximize the potential of new PI systems

Start-Up, User Training and Life Long Support

Contracted Services

PI is dedicated to supporting its customers right from the initial consultation through to when a customer has purchased a
PI system. Beyond that, PI’s services division is committed toensuring that every aspect of owning a PI system is catered for.

Customers subscribing to Contractual Support Services will­receive commitment from PI to achieving agreed Service Levels.
These include responding to the customer’s first contact and providing remote technical support, through to response times for a
PI expert to be on site, either to repair or replace a defective unit.

Global Coverage
Supported by four Global Service Hubs in Asia, China, Europe
and USA, with field product specialists working from these hubs,
PI is able to support all technologies and customer applications
via this global services team.
PI’s Standard On-Site Servicesn S etup and Commissioning – On-site support to un-box,

set-up and commission the PI system.

Extended Warranty
Most customer applications require PI‘s systems to be operational beyond the standard warranty period. Extending the warranty
for additional year(s), is simply extending the customers peaceof mind and PI’s commitment that the product will not fail due
to poor workmanship or faulty materials. Should a customer’ssystem then fail due to these conditions, PI will cover the costs
to repair or replace it.

n T raining Program – User training on software and program-ming, through to optimization of system performance.
n M aintenance Systems Health Check – Preventative mainten-

ance to prolong the life of the motion devicen S upport – Ongoing remote and on-site support to maximize

system uptime and provide maintenance for the whole lifeof any system

W W W. P I . W S|POSITIONING

Headquarters

Subsidiaries

GERMANY

USA (East) & CANADA

USA (West) & MEXICO

Physik Instrumente (PI)GmbH & Co. KG
Auf der Roemerstrasse 176228 Karlsruhe
Phone +49 721 4846-0
Fax		 +49 721 4846-1019
info@pi.ws
www.pi.ws

PI (Physik Instrumente) L.P.
Auburn, MA 01501
www.pi-usa.us

PI (Physik Instrumente) L.P.
Irvine, CA 92620
www.pi-usa.us

USA (San Francisco Bay Area)

UK & IRELAND

PI (Physik Instrumente) L.P.
Sausalito, CA 94965
www.pi-usa.us

PI (Physik Instrumente) Ltd.
Cranfield, Bedford
www.physikinstrumente.co.uk

ITALY		NETHERLANDS

Physik Instrumente (PI) S. r. l.
Bressowww.pionline.it

PI Benelux B.V.
Sint-Oedenrode
www.pi.ws/benelux

FRANCE		SPAIN

PI France SAS
Aix-en-Provence
www.pi.ws

Micos Iberia S.L.
Vilanova i la Geltrú
www.pimicos.es

PI miCos GmbH
Freiburger Strasse 30
79427 Eschbach
Phone +49 7634 5057-0
Fax		 +49 7634 5057-99
info@pimicos.com
www.pi.ws
PI Ceramic GmbH
Lindenstrasse
07589 Lederhose
Phone +49 36604 882-0
Fax		 +49 36604 882-4109
info@piceramic.com
www.piceramic.com

JAPAN
PI Japan Co., Ltd.
Tokyo
www.pi-japan.jp

PI Japan Co., Ltd.
Osaka
www.pi-japan.jp

CHINA© Physik Instrumente (PI) GmbH & Co. KG
All contents, including texts, graphics, data etc., as well as their layout,
are subject to copyright and other protective laws. Any copying, modification or redistribution in whole or in parts is subject to a written
permission of PI.
Although the information in this document has been compiled withthe greatest care, errors cannot be ruled out completely. Therefore,
we cannot guarantee for the information being complete, correct and
up to date. Illustrations may differ from the original and are not bind­ing. PI reserves the right to supplement or change the information
provided without prior notice.

Physik Instrumente(PI Shanghai) Co., Ltd.
Shanghaiwww.pi-china.cn

Physik Instrumente(PI Shanghai) Co., Ltd.
Beijing
www.pi-china.cn

SOUTHEAST ASIA

TAIWAN

PI (Physik Instrumente)
Singapore LLP
Singaporewww.pi-singapore.sg
For ID / MY / PH / SG / TH / VNM

Physik Instrumente (PI)Taiwan Ltd.
Taipeiwww.pi-taiwan.com.tw

KOREA
PI Korea Ltd.
Seoul
www.pikorea.co.kr

W W W. P I . W S

DBRO02 Precision Motion Control Solutions 11/2017. Subject to change without notice. © Physik Instrumente (PI) GmbH & Co. KG 2017

MOTION