Thermal Evaporators

Temperature Controller
Input
OutputInput voltage

100 ~ 240V

Maximun output current

7A (digital meter indication)

Maximun output voltage
Number of outputs

Output current adjustment

Temperature Monitor

Temperature sensor

15V

4-channel switching system

UE Series

Manual adjustment of current output
W-Re thermocouple(for high-temperature evaporation models UE-104CT, 103CST, and 103CSFT)
K-type thermocouple

Number of channels displayed

Thermal Control(for organic molecular evaporation models UE-104CT, 103CST, and 103CSFT)
1 channel (interlocking with the control channel)

Control circuit

Current output Pl control based on the temperature sensor input

Set temperature input

Input to the 10-turn potentiometer and indicated on the digital meter

Number of channels controlled

Size of Steel Case

1 channel (4-channel switching system)

Approx. 430mm (W) x 350mm (D) x 100mm (H)Multi-Source High Temperature Thermal Evaporator(UE-103C/104C series)
Multi-Source Thermal Evaporator(UE-203C/204C series)

1. Multi-Source High Temperature Thermal Evaporator (UE-103C/104C series)
Model number:
UE-Number of elements

L104C

4L103CS3L103CSF

3104C

4104CT

4103CS

3103CST

3103CSF

3103CSFT

3

Standardized conﬁguration

Thermo couple(W-RE)

Shutter function

Film thickness
gauge function

Temperaturecontroller

Main body 4-element evaporator
without shutter function
Without equipment

2. Multi-Source Thermal Evaporator (UE-203C/204C series)
Model number:
UE-

Number of elements

204C

4204CT

4203CS

3203CST

3203CSF

3203CSFT

3

Standardized conﬁguration

Thermo couple(K-Type)

Shutter function

Film thickness
gauge function

Temperature controller

These are compact and cost-eﬀective three orfour element cruicible type evaporators.
The product lineup consists of two models:
one for high-temperature evaporation(temperature range: 700 to 1700℃) and theother for organic molecular evaporation(temperature range: 150 to 800℃).

Temperaturecontroller

The shutter and the ﬁlm thickness gauge
are optional attachments.
Without equipment

Instrumental components are subject to change without prior notice for improvement in performance.
Main body of 3-element evaporator
with shutter function

UNISOKU Co., Ltd.
E-mail: info@unisoku.co.jp

Web site: http://www.unisoku.com/
20190412

An evaporator with no shutter mechanism
is consisted of four elements, while thatwith the shutter function is consisted ofthree. The temperature can be controlled
independently for each element.

Multi-Source High Temperature Thermal Evaporator(UE-103C/104C series)
Structure

Structure

Evaporator

Crucible-type evaporator

Inner Volume of Crucible

3mm (dia.) x 6mm (depth) (material: alumina)

Heating Method

Number of Elements (Cruicibles)

Multi-Source Thermal Evaporator(UE-203C/204C series)

Direct resistance heationg by ﬁlament

4 for an evaporator with no shutter function; 3 for an evaporator with shutter function

EvaporatorCrucible-type evaporator

Inner Volume of Crucible

2.6mm (dia.) x 6mm (depth) (material: tantalum)

Heating Method

Direct resistance heating by ﬁlament

Number of Elements (Crucibles)

4 for an evaporator with no shutter function; 3 for an evaporator with shutter function*The main body needs to be returned to Unisoku for the crucible exchange.

*The main body needs to be returned to UNISOKU for the crucible exchange.
*Additional expenses are also needed.

Mounting Flange

Mounting Flange

A water-cooling jacket is provided as standard (amount of water: 1L/min.)Cooling Mechanism

10-pin current lead terminal

Connector

Cooling Mechanism
Distance from the Flange Faceto the Crucible Head Tip
Target Distance

Vacuum Chamber Mounting Direction

Performance

Heating Temperature Range*Water cooling is indispensable, especially when the evaporatoris used at 1000℃ or higher.

Distance from the Flange FaceAt least 100mm from the crucible head tip

Target Distance(The distance can be extended at your request at the time of order.)The vacuum chamber must be mounted at an angle of at least 30°from the horizontal.

700 ~ 1700℃ (Recommended temperature during continuous use is 700 ~ 1600℃.)
temperature control.
*The temperature measurement is not available if the evaporator has no thermometer.
*There are some diﬀererences between the inside temperature of crucible and setting temperature.

Max. 7.5A ~ 14V<200℃

Baking Temperature

Evaporation Element
Material Form

Evaporation Material that can be used

Powder, granule, wire, and other forms that can be places in the crucible.
(depending on the mounting angle).

Elements that evaporate at 1700℃ or lower. Note that elements that evaporate at700℃ or lower are hard to control.

Provided as standard for the L103CS/103CS series

Manual switching using the rotary motion feedthrough (with a rotation stopper)

Swithching Mechanism

Size: 34mm dia.; Rotation diameter: 30mm

Shutter Plate

Film Thickness Gauge Function

Film Thickness Gauge Element Mounting Position
Film Thickness Gauge Element
Film Thickness Monitor

A water-cooling jacket is provided as standard (amount of water: 1L/min.)*Water cooling is indispensable, especially when the evaporator is used at 500℃ or higher.
At least 100mm from the mounting ﬂange face to the crucible head tip (with no shutter).

to the Crucible Head Tip(The distance can be extended at your request at the time of order.)Vacuum chamber mounting direction

Performance

Heating Temperature Range

Provided as standard for the L103CSF/103CSF series
Shutter plate surface
Crystal oscillator

Inﬁcon ﬁlm thickness gauge element monitor (SQM160-S-2-R) is provided as standard.

At least 100mm from the crucible head tip

The vacuum chamber must be mounted at an angle of at least 30°from the horizontal.

150 ~ 800℃
*There are some diﬀerences between the inside temperature of crucible and setting temperature.

Max. 7.5A ~ 14V

Heating Current<200℃

Baking Temperature

Evaporation Element

Powder, granule, wire, and other forms that can be places in the crucible.

The recommended amount is 1/2 of the volume of the crucible or smaller

Material Fill Volume*Temperature measurement is not available if the evaporator has no thermometer.

Shutter Function

10-pin current lead terminal

Material form

The recommended amount is 1/2 of the volume of the crucible or smaller

Material Fill Volume

ICF 70Connector

At least 100mm from the mounting ﬂange face to the crucible head tip (with no shutter).

*The maximum temperature is 1600℃ (current: 7A) when a UNISOKU controller is used for

Heating Current*additional expenses are also needed.

ICF 70

Evaporation material that can be used
Recommended Elements(depending on the mounting angle).

Elements that evaporates at 800℃ or lower. Elements that do not react with tantalum
Various organic molecules(The material that evaporation temperature is lower than decomposition temperature)

Shutter Function

Provided as standard for the 203CS series

Manual switching using the rotary motion feedthrough (with a rotation stopper)

Switching Mechanism

Size: 34mm dia.; Rotation diameter: 30mm

Shutter Plate

Film Thickness Gauge Function

Provided as standard for the 203CSF series

Film Thickness Gauge Element Mounting Position

Shutter plate surface

Film Thickness Monitor

Inﬁcon ﬁlm thickness gauge element monitor (SQM160-S-2-R) is provided as standard

Film Thickness Gauge Elemet

60mm

70mm

Crystal oscillator

100mm
ICF70

more than 100mm

Target Sample

more than 100mm

Target Sample
ICF70

Main body of Evaporator

Main body of Evaporator with shutter function

130mm

70mm

100mm