Model 1070
NanoClean

Effectively cleans specimens, holders, grids,and bulk objects for electron microscopy
and many other applications
EXCELLENCE…MAGNIFIED

Model 1070 NanoClean• Multifunctional – Simultaneously cleans specimens, specimen holders, and stubs.
• Inductively coupled, downstream plasma for optimal performance.
• Sputter-free – No change to elemental composition or structural characteristics.
• Accepts two EM specimen holders.
• Compatible with side-entry holders for all commercial TEMs, STEMs, and SEMs.
• Accommodates large objects.
• Ideal for surface science techniques.
• Multiple gas inlets with mixing capabilities.
• High frequency power with automatic
matching network.
• Oil-free vacuum system.
• Simple setup withtouchscreen interface.
• Handy for evacuating
vacuum storage
containers.

Model 1070 NanoCleanremoves contamination

Electron microscopy requires clean specimens and holders
Clean, well prepared specimens are imperative for imaging
and microanalysis in electron microscopy.
Transmission electron microscopy (TEM) requires thatspecimens be prepared without altering their microstructure
or composition.
Modern electron microscopes with high brightness electron
sources such as LaB6 filaments and field emission guns
(FEG) use a small electron probe with high beam current
for microanalysis, yielding high-resolution images as well as
enhanced analytical data. As probe size decreases and beam

current density increases, specimens tend to become easily
contaminated. As a result, the quality of the specimen and thecleanliness of both the specimen and the specimen holder are
more important than ever.
Contamination typically comes from several sources: inadvertent
touching of specimens or specimen holders, electron microscopecolumn contamination, and adhesives or solvents used in thepreparation process. Even when great care is taken to clean
the specimen, standard cleaning methods are often notcompletely successful.

Model 1070 NanoClean
Clean large objects and grids
In addition to traditional electron microscopy applications, many other objects can benefit from plasma processing.
Larger objects, such as pieces of semiconductor wafers or SEM/AFM/SIMS holders, can also be cleaned.
For biological TEM applications, grids can be subjected to the plasma to promote hydrophilic wetting.

Model 1070
NanoClean forelectron microscopy
applications

The Model 1070 cleans specimens and holders immediately before they are inserted into
an electron microscope. Plasma cleaning both removes existing carbonaceous debris fromthe specimen and prevents contamination during imaging and analysis.
A low-energy, inductively coupled, high frequency (HF), downstream plasma effectively
cleans the specimen surface without changing its elemental composition or structuralcharacteristics. Highly contaminated specimens can be cleaned in two minutes or less.
The Model 1070 readily accepts one or two side-entry specimen holders for allcommercial TEMs and STEMs, and can accept bulk specimens for cleaning before
conducting scanning electron microscopy (SEM) or surface science analysis.

Plasma cleaning
In a nonequilibrium, high frequency plasma, free electrons are accelerated to high velocities by an oscillating
electromagnetic field and collide with gas atoms, forming ions and sustaining the plasma. The plasma products
impinge upon surfaces with energies of less than 12eV, which is below the specimen’s sputtering threshold.
Cleaning is solely by the chemical reaction between radicals from the plasma and carbonaceous material on the specimen
and specimen holder.
An oxygen plasma is highly effective in removing organic (hydrocarbon) contamination. The reactions yield H2O, CO,and CO2 which are evacuated by the vacuum system.
A mixture of 25% oxygen and 75% argon is generally recommended. Other gases or mixtures can also be used.

Clean specimens
and holders

A wide variety of materials prepared by a number of techniques can be plasma
cleaned by the Model 1070 and yield identical results – no contamination of thespecimen under the electron beam.
The specimen holder is inserted through a port into the plasma chamber. The port
contains a vacuum-sealing surface compatible with the specimen holder’s o-ring.
The chamber is configured to accept one or two specimen holder ports. Ports are easilyinterchangeable without tools in as little as 10 seconds. Ports are available for sideentry specimen holders for FEI/Philips, Hitachi, JEOL, and Carl Zeiss microscopes.

3Model 1070 NanoClean
Clean specimens
and holders (continued)

For specimens containing significant amounts of carbon or those mounted onto
carbon support grids, shielded specimen holder ports are available to optimize thecleaning rate of the plasma.

Typical TEM specimen holder port

Imaging can proceedwith confidence

Plasma cleaning is an essential final step in the preparation of specimens for electron
microscopy. Using the Model 1070 NanoClean ensures confidence that organic
contamination will not interfere with imaging or analysis, even during fine probe
microanalysis for extended periods.

Plasma cleaning
results: SEM (EDX)The benefits of plasma cleaning are not only for TEM but also for bulk specimens,
which can be readily introduced through the chamber’s top port. Specimens for SEM
and surface analysis can be cleaned as well as specimen holders, aperture strips, tweezers,
specimen clamping rings, and anything else that can be placed into the plasma chamber.

Plasma chamber

The plasma is generated in a cylindrical chamber made of quartz and stainless steel. Ahigh frequency antenna, located outside the chamber, inductively couples the oscillating
electromagnetic power to the process gas contained in the chamber. No components arelocated within the chamber other than the object that is being cleaned. Sophisticatedgas dynamics associated with the downstream plasma ensure that the plasma is evenly
distributed within the chamber to clean the specimen with negligible heating.

4Model 1070 NanoClean
Plasma chamber(continued)

Receptacles on the front surface of the chamber can accept two ports for standard EM
specimen holders. A view port provides the ability to observe the inside of the chamber.
A lid on top of the chamber allows larger objects to be placed into the plasma.

Chamber lid closed

Vacuum system
and load lock

Chamber lid open

An oil-free vacuum system is essential to prevent contamination. The vacuum system
for the Model 1070 consists of a turbomolecular drag pump and a multistage
diaphragm pump, an ideal combination for establishing suitable vacuum characteristics
to activate and sustain the plasma. The vacuum level is measured by a Pirani gauge.
The chamber includes a load lock for rapid specimen exchange which allows plasma
cleaning to begin almost immediately after a specimen is inserted. An electronicallyactuated gate valve isolates the plasma chamber from the vacuum system. Pump downtime for the chamber is less than 50 seconds. Also, the chamber can be vented within
5 seconds after the conclusion of plasma processing. These features make the Model
1070 ideal for high throughput applications.
The Model 1070 can also be used to evacuate individual specimen holder vacuum
storage containers and cyrotransfer TEM specimen holder dewars.
A port plug inserted into the specimen holder port seals the chamber under vacuum
when the instrument is not in use.

Power supply

The high frequency (13.56 MHz) oscillating power supply is used to initiate andsustain a low-energy, inductively coupled plasma (ICP). An ICP is ideal for microscopy
applications since it delivers ions with energy low enough that the specimen’s properties
are not altered.

5Model 1070 NanoClean
Power supply(continued)

An automatic matching network ensures that the high frequency power is effectively
coupled to the plasma and the delivered power is suited for the application. The
matching network regulates plasma power for a variety of conditions, objects to beprocessed, or gases employed. It also guarantees plasma compatibility with specimen
holders produced for diverse EMs.
Effective shielding prevents high frequency interference and fully complies with FCC
guidelines.

Process gas

The Model 1070 contains three mass flow controllers and is designed to accept
multiple gases. Typically, the time-proven gas mixture of 25% oxygen and 75% argon
is connected to one of the gas inlets. The Model 1070 is fitted with two additional gas
inlets which accept gas supplies that can be blended using the Model 1070’s internalmass flow technology.

Instrument controls
and display

An easy-to-use touchscreen embedded module allows the user to control individual
instrument functions such as delivered power, chamber pressure, gas mixture, andprocess time.
For dedicated cleaning of EM specimens and holders, the Model 1070 includes a recipe
that yields optimal plasma processing conditions. All the user needs to do is insert theEM specimen holder into the specimen holder port and establish the process time. The
instrument automatically controls the vacuum, supplies the appropriate power and gas
flow, and energizes the plasma.
Recipes are stored for applications such as enhancing the hydrophilic properties of
biological support grids. Custom recipes to set up a unique set of operating conditions
can be created and stored by using the touchscreen.
The display provides a real-time representation of the instrument’s key parameters
including the remaining processing time.
Cleaning terminates automatically when the specified time has elapsed. A visualindicator notifies the user that plasma cleaning is complete. The specimen remains
under vacuum until the user initiates the venting process.

Maintenance

The Model 1070 enclosure has been designed for ease of service.
When connected to the Internet, the Model 1070 can be accessed remotely for
diagnostic purposes.
Software tracks the vacuum system’s total operating time so that routine maintenancecan be scheduled.
6Model 1070 NanoClean Accessories
Model 9010
VacuumStorage Container

Model 9010 Vacuum Storage Container. After cleaning,
specimen holders can be inserted into Model 9010 Vacuum
Storage Containers so they can be stored or transported
under vacuum. A sight glass gives a clear view of thespecimen in the specimen holder.

Model 9020Vacuum
Pumping Station

Model 9020 Vacuum Pumping Station. The pumping station
simultaneously stores five specimen holders under vacuum.
It includes a heavy duty metal base with non-skid feet, fiveindependently valved vacuum storage containers, a vacuum
pumping manifold, and all necessary components forconnecting to the Model 1070 NanoClean.

7Model 1070
specifications

Plasma system

Vacuum system

ChamberGas

User interface

WeightDimensions
Power requirements
Warranty

High frequency (13.56MHz) power amplifier inductively
coupled to a quartz and stainless steel plasma chamber
Ion energies of less than 12eV as a function of the downstream plasma
Automatic matching network
Compatible with TEM specimen holders for FEI/Philips,Hitachi, JEOL, and Carl Zeiss
Oil-free turbomolecular drag pump backed by a multistage
diaphragm pump
Vacuum load lock
Ultimate vacuum of 5 x 10-6 mbar
Accepts two specimen holder ports
Chamber lid provides access for bulk objects up to 3.5" (8.9cm)
in diameter
Viewport for chamber observation
Three gas inputs
Nominal 10psi delivery pressure
Flow rate is controlled by the embedded module
Programming through a touchscreen embedded module
Dedicated recipes for EM specimen and grid processing
Ability to customize parameters
Process timer for automatic termination
160 lb (73 kg)
27" (686mm) W x 22" (559mm) H x 22.3" (566mm) D
100/120/220/240VAC, single phase, 660 Watts
One year

U.S. Patent Number 5,633,502, Dated May 27, 1997
U.S. Patent Number 5,510,624, Dated April 23, 1996
(licensed from the Argonne National Laboratory)

EXCELLENCE…MAGNIFIED

E.A. Fischione Instruments, Inc.
9003 Corporate Circle
Export, PA 15632 USA
Tel: 724.325.5444
Fax: 724.325.5443
E-mail: info@fischione.com
Website: www.fischione.com
Part No. 011-1039, Rev. 0