MOTION|POSITIONING

Microscopy and Industrial Applications
What is your Application?

2 (3) Photon Fluorescence Microscopy

Headquarters

ACS Motion Control

PI Subsidiaries

Digital Slide Scanning

GERMANYISRAELUSA (East) & CANADA

USA (West) & MEXICO

Today most microscopy routine diagnostics on histological slides(histology, pathology, hematology, gynecology) is done by automated screening devices. These devices scan the sample slides ina structured way at a very high speed. To adjust the z-focus andto accommodate to z-height differences of the sample during theXY-scanning the Z-focus drive has to quickly and precisely adjustin travel ranges typically between several hundred micrometer toseveral millimeter, depending on the device design.

Physik Instrumente (PI)GmbH & Co. KG
Auf der Roemerstrasse 176228 Karlsruhe
Phone +49 721 4846-0
Fax+49 721 4846-1019
info@pi.ws
www.pi.ws

ACS Motion Control Ltd.
Ramat Gabriel Industrial Park
1 Hataasia St.
Migdal HaEmek, 2307037
POB 984
Phone +972-4-6546440
Fax+972-4-6546443
info@acsmotioncontrol.com
www.acsmotioncontrol.com

PI (Physik Instrumente) L.P.
Auburn, MA 01501
www.pi-usa.us

PI (Physik Instrumente) L.P.
Irvine, CA 92620
www.pi-usa.us

Wafer Inspection
As semiconductor devices move towards higher integration anddensity with advances in semiconductor materials and processes,
the critical defect size will decrease. There are several factors that
affect the topology of the wafer surface: The surface tension induced by IC manufacturing and the surface roughness. To quickly
obtain a high-quality surface image, defect inspection tools must
operate at high resolutions and with high dynamics. Precise andfast autofocus ability is critical.

PI miCos GmbH
Freiburger Strasse 30
79427 Eschbach
Phone +49 7634 5057-0
Fax+49 7634 5057-99
info@pimicos.com
www.pi.ws
PI Ceramic GmbH
Lindenstrasse
07589 Lederhose
Phone +49 36604 882-0
Fax+49 36604 882-4109
info@piceramic.com
www.piceramic.com

USA (San Francisco Bay Area)

UK & IRELAND

PI (Physik Instrumente) L.P.
Sausalito, CA 94965
www.pi-usa.us

PI (Physik Instrumente) Ltd.
Cranfield, Bedford
www.physikinstrumente.co.uk

ITALY

NETHERLANDS

Physik Instrumente (PI) S. r. l.
Bressowww.pionline.it

PI Benelux B.V.
Sint-Oedenrode
www.pi.ws/benelux

FRANCESPAINPI France SAS
Aix-en-Provence
www.pi.ws

Micos Iberia S.L.
Vilanova i la Geltrú
www.pimicos.es

JAPANPI Japan Co., Ltd.
Tokyo
www.pi-japan.jp
CHINA© Physik Instrumente (PI) GmbH & Co. KG
All contents, including texts, graphics, data etc., as well as their layout,
are subject to copyright and other protective laws. Any copying, modification or redistribution in whole or in parts is subject to a written
permission of PI.
Although the information in this document has been compiled withthe greatest care, errors cannot be ruled out completely. Therefore,
we cannot guarantee for the information being complete, correct andup to date. Illustrations may differ from the original and are notbinding. PI reserves the right to supplement or change the information
provided without prior notice.

Physik Instrumente(PI Shanghai) Co., Ltd.
Shanghaiwww.pi-china.cn

Physik Instrumente(PI Shanghai) Co., Ltd.
Beijing
www.pi-china.cn

SOUTHEAST ASIA

TAIWAN

PI (Physik Instrumente)
Singapore LLP
Singaporewww.pi-singapore.sg
For ID / MY / PH / SG / TH / VNM

Physik Instrumente (PI)Taiwan Ltd.
Taipeiwww.pi-taiwan.com.tw

KOREA

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PI Japan Co., Ltd.
Osaka
www.pi-japan.jp

PI Korea Ltd.
Seoul
www.pikorea.co.kr

W W W. P I . W S

BRO77E P-725.xCDE2 PIFOC 06/2021 0.0. Subject to change without notice. © Physik Instrumente (PI) GmbH & Co. KG 2021

In 2 or 3-photon fluorescence microscopy, two photons excite
visible fluorescence in deep tissue layers in the infrared range.
By using infrared emissions, a deeper penetration is achieved,
this is why a respectively large travel range of the focus drive isrequired. For example, cell organs, metabolic processes, etc. wereexamined. The users generate Z image stacks.

P-725 PIFOC ® PORTFOLIOPIEZOBASED OBJECTIVE
FOCUS DRIVE SERIESW W W. P I . W SComprehensively Improved:
PIFOC® Objective Focussing Drives

Main Benefits andImproved Usability

An Unparalleled Wide Offer
with Leading Key Features

Large Travel Ranges, High Dynamics, Easy HandlingThis Is what Makes the Difference

From ≤ 18 µm to 7 mm Travel Range: The Right Solution for Any Application

Be it in life sciences, materials microcopy, quality assurance, orsemiconductor manufacturing – vertical positioning systems forobjectives play an increasingly important role in numerous applications. Piezo-based, lever-amplified vertical axes have proventhemselves as being the standard solution for this task for about
20 years now. PI's extensive portfolio of compact PIFOC® objective
positioners has now undergone a complete redesign. This redesign wanted to achieve higher dynamics, travel ranges to 800 µm,
and an improved usability. The result is an even more powerfulrange than before, which has the right solution for virtually all
applications.

For Better Work Results

Travel range

Piezo drives with new lever designsn	Step&Settle(10% step,150 g load)

Minimalincremental
motionResonant
frequency(@ 150 g)

Recommended
electronics

Mounting
interface(s)E-709.1C1L

Objective
threadadapter /Comments

Up to 800 µm travel rangen	High productivity due to short dataacquisition times/quick scanningn	High dynamics i.e. high resonant
frequencies and short settling times≤ 18 µm

5 ms

0,6 nm450 Hz(@ 200 g)

100 µm6 ms

1 nm

560 Hz(@ 200 g)n	Highly flexible cables allow for tightbending radii / tolerated interfaces
with threads for platform integration

E-754.1CD*

Threads &location holes
in base bodyE-709.1C1L
E-754.1CD*

Objective
threadadapter

E-709.1C1L

Objective
threadadapter /P-725.CDD

Reliable performance based on
precise motion and positioning

Shortest
settling timesn	Usability & Service
Simple handling thanks to newstrain relief and highly flexible cables

For highloadobjectivesn	P-726.1CD

Lowest possible restriction on thefocus displacement in Z thanks toflat cross-sections of the clampsn	

NEWAlways the right parfocal length
when changing magnification
thanks to adapted spacers

100 µm

14 ms

1 nm

290 Hzn	

New strain relief for robustness
and longevity

Integration Made Easy
Simple Clamp Ring for Threaded Adapter

P-725.1CDE2

No wear – nowhere: 24/7 operation
thanks to wear-free, lever-amplified
piezo drivesn	NEW

400 µm

22 ms

4 nm

175 HzShort delivery timesn	Support by engineeringand application experts

NEW

Flat cross-sections of clamps
for tight installation spaces

W W W. P I . W S

E-754.1CD*

E-709.1C1L

MOTION|POSITIONING* For special high performance requirements

5Threads &location holes
in base body

Objective
threadadapter /Threads &location holes
in base body

Objective
threadadapter /NEW: higher
stiffness &improvedusability

NEW: longtravel

800 µm

39 ms

5 nm

110 Hz2.000 µm

145 ms

5 nm

n.a.

E-861.1A1(includedin scope ofdelivery)

Objective
threadadapter

Self-locking
at rest due
to NEXACT®
technology

7.000 µm

<15 ms(100nm;+-15nm)

n.a.

C-414
G-910
ACS SPiiPlus +NPMpm(NanoPWMincl.)

Throughholes for
mountingon flatsurfaces

Adjustableweight force
compensation
to 1 kg

E-754.1CD*

P-725.8CDE2Matching spacer for same parfocal
length / Slim cross-sections enable theuse of directly adjacent lens mounts

4E-709.1C1L

P-725.4CDE2n	

PI provides all the necessary accessories needed forthe most common usage, which is screwing thePIFOC® into the revolving nosepiece. The apertureof the clamp ring is big enough for objectives up toM34. The threaded adapter for objectives of different sizes are fixed with Torx screws in the clamp
ring. Furthermore, the PIFOC® can flexibly be integrated in platform assemblies. For this purpose,tolerated interfaces are placed in the base body.

E-754.1CD*

NEW: higher
stiffness &improved
usabilityThreads &location holes
in base body

ND72Z2LAQ

10 nm

V-308

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N W| W .PPOI S.W
I TSI O N I N G