SPACEFABMOTION CONTROLHIGH DYNAMICSPRECISIONETHERCAT®

6 DEGREESOF FREEDOMREPEATABILITYSCALABLE
DESIGNPHOTONICS ALIGNMENTHEXAPODPOSITIONING SYSTEMSPARALLELKINEMATIC ROBOTPAYLOAD FROM GRAMSTO TONSW W W. P I . W SHexapod Positioning Systems

Product Finder Online – What is the easiest way for you to find the best positioning solution?
The printed catalog is a major showcase for PI and, as well as presenting the entire product range,it also acts as a reference for all of our motion solutions. However, to take advantage of the latest
products and developments, we recommend using the product finder on the PI website www.pi.ws.
How to use the product finder:
Select the product type specified by the axes of motion required. Selection of more criteria expands
or shortens the list of results. Select more than one filter at a time, for example, to find positioning
stages designed for higher load capacity, too.

2

W W W. P I . W SIntroduction

04
12
15
16
19
20
21
22
24
25
26
27
28
29

Compact Hexapods .............................................................................................................................................................
Compact Hexapods .....................................................................................................
Miniature Parallel Kinematics / Hexapods ...................................................................

30
32
50

Precision Positioning Hexapods ..........................................................................................................................................
Positioning Hexapods for Loads up to 250 kg .............................................................
Positioning Hexapods for Loads over 250 kg ..............................................................

54
56
66

Dynamic Motion Hexapods .................................................................................................................................................

72

Fast Multi-Channel Photonics Alignment Systems .............................................................................................................
Introduction .................................................................................................................
Solutions .....................................................................................................................

80
82
88

Precision Positioning
Hexapods

Markets and Applications ............................................................................................
Custom Examples Picture Wall ...................................................................................
Impact of the Drive Technology ..................................................................................
Reasons for Choosing a PI Hexapod System ...............................................................
PI Makes Hexapod Start Up Easy ................................................................................
Factory-Testing at PI ....................................................................................................
The PI Group – A Strong Partner for Industry and Research .......................................
The PI Group Milestones .............................................................................................
Expert Consulting ........................................................................................................
Engineering Design Expertise and Customization .......................................................
Production Capabilities ...............................................................................................
Vacuum Know-How .....................................................................................................
From 1-off to Series: OEM Users Benefit From Maximum Flexibility ..........................
Global Service and After-Sales ....................................................................................

Compact Hexapods

INTRODUCTION

Motion Control

Fast Multi-Channel Photonics
Alignment Systems

Dynamic Motion
Hexapods

PRODUCTS

Motion Control .................................................................................................................................................................... 106
Hexapod Controllers .................................................................................................... 108
Accessories ................................................................................................................. 116

Terms and Technology Glossary ......................................................................................................................................... 124

Product Index ...................................................................................................................................................................... 131

More information, step-files and downloads are available from our website www.pi.ws.
All data subject to change without notice, ©PI 2018.
3

MOTION|POSITIONING

Terms and Technology
Glossary

Speciﬁc Softwarefor Hexapod Systems

Specific Software for Hexapod Systems ............................................................................................................................. 122

Markets and Applications

18-Axis double alignment system provides fast NxM alignment of SiP devices in wafer probers. Cascade Microtech’s pioneering CM300xi
photonics-enabled engineering wafer probe station integrates PI’s Fast Multichannel Photonics Alignment systems for high throughput,
wafer-safe, nano-precision optical probing of on-wafer Silicon Photonics devices. (Image: Cascade Microtech, a FormFactor company)

SILICON PHOTONICS (SiP) PACKAGING
AND TESTING
The convergence of photonics and semiconductors promises aleap in data throughput, parallelism and energy efficiency. Testand packaging of silicon photonics elements require nanoscalealignments that cannot be performed using visual or mechanical references. Instead, these optimizations must optimize theoptical throughput itself.
In addition, silicon photonic designs often incorporate multiple
parallel optical paths with multiple, interacting inputs and outputs, all needing optimization. PI automation subsystems allow
this parallel optical alignment in several degrees of freedom
all-at-once which is a decisive step forward in mass productionof silicon photonics components. Often, global optimization isachieved in less than a few hundred milliseconds, resulting intime savings that can exceed two orders of magnitude.
Because different devices and production applications present
different requirements, PI’s modular architecture offers solutions
for virtually all production probing & packaging needs of SiP
fabricators and their tool OEMs.
Fast Multi-Channel Photonics Alignment (FMPA) systems isbased on a combination of a high-speed piezo scanner, a micropositioning system (XYZ or 6-axis hexapod), and a high-performance controller with firmware-based routines for opticalalignment.

4

W W W. P I . W SIntroduction

OPTICAL ALIGNMENT
As miniaturization continues to advance, it becomes necessary to manufacture and assemble components with even more
precision. PI hexapods are being used more frequently during
the production and assembly process for optical components
because they are capable of meeting the requirements on precision made by industry.
In the case of small cameras for example, the lenses or lensassemblies are positioned and sometimes the CCD chip itself.
In most cases, not only the linear degrees of freedom need to be
optimized but also the rotatory degrees of freedom and a hexapod simplifies this process considerably with its user-definable
pivot point.

5

MOTION|POSITIONING

Markets and Applications

MICROPRODUCTION,
PRODUCTION, ELECTRONICS
MANUFACTURING,FACTURING, AUTOMATED
PRODUCTION
CTION LINES
If multi-axis
s systems are required for positioning tasks inmechanical engineering parallel-kinematic hexapods are frequently used.
ed. Areas of application include, for example, handling systems
ms in electronics production, tool control in precision
machine tools,
ols, for drilling and milling, or for mounting tasks invehicle, aircraft,craft, or heavy equipment construction. The parent
PLC or CNC can communicate with the hexapod system over a
standardized
d real-time Ethernet interface. It then acts just likean intelligent
nt drive. Of course, the hexapod controller can also
act as masterter for position control. In this case, however, themotion cannot
not be synchronized with other drive axes, measuring systems,s, etc.

Automated testing procedures ensure quality, e.g.,in the production process of printed circuit boards(PCBs). Thereby, the precise control of the forces acting
on the sensitive boards as well as the fast capturing
and interpretation of measurement data are extremely
important.

6

W W W. P I . W SIntroduction

INDUSTRIAL QUALITY ASSURANCE
Today, microproduction technology makes high-precision, mostly multi-axis positioning systems absolutely necessary for both
assembly and quality assurance, and they also have to be as compact as possible to enable them to be properly integrated into
the production units. In most cases, only small loads need to be positioned with high accuracy. Experience shows that parallelkinematic hexapods are predestined for precision positioning with up to six degrees of freedom.

The Dimensional Measuring machine DM401 seriesof the DYMACO Group employs a H-820 Hexapod
for positioning headlamps. The DM401 series is avery compact and flexible workstation for in-line
automated dimensional measuring of headlamps
in the automotive industry. The use of hexapod systems allow for an outstanding flexibility for a large
variety of samples of in-line automation systems byminimizing the required space for motion robotics.
(Image: DYMACO GROUP)

7

MOTION|POSITIONING

Markets and Applications

MOTION SIMULATION AND
IMAGE STABILIZATION
Vibrating tables are used for testing resistance to vibration. Testing becomes evenmore complex if the behavior is to be examined with predefined motion such as
vibrations of a vehicle or airplane at certain
velocities. Further typical examples include
devices in acceleration or gyroscopic sensors such as those used in smartphones,
cell phones, and cameras that detect changes
in position, e.g., in cameras for detecting any
trembling motion of the photographer. The
image stabilization system can then compensate automatically. Its algorithms andmechanical system also have to be checked.
To test image stabilization systems, technical standards are established by the CIPA
(Camera and Imaging Product Association),
an international alliance of camera manufacturers similar to an ISO committee. It has
released DC-011-2015 as the new standard
for motion simulation test conditions.
Of course, simulation for test purposes requires natural and artificial motion to beprecise, repeatable, and simulated with thesame dynamics and accuracy. This involves
running high-precision trajectories with thecorresponding dynamics. Therefore, multiaxis, precise, and dynamic positioning systems are necessary.

The H-811 Hexapod simulates camera shake fortesting image stabilization systems according
to the CIPA standard. Here in test equipment at
Image Engineering. (Image: Image Engineering)

8

W W W. P I . W SIntroduction

Engineers installing a PI hexapod at
a subreflector of an ALMA telescope.
50 antennas of the ALMA observatory
use high-precision hexapods from PI.
Under extreme ambient conditionsof the Atacama Desert, the hexapodsalign the subreflectors to the large
main reflectors of the radio telescopes. Technological demands here
are high: Low air pressure, temperature differences of up to 50 °C, strong
winds, dust and rain are additional
challenges in 5000 meters above sea
level that have to be faced.

ASTRONOMY
Ground-based observatories for the observation of radio waves or visible light use acomplex design of many subsequent mirrors. To keep the optical path at its optimum, thesubreflectors even out external impacts on the mechanical system. Deviations can occur,for example, with antenna tracking that compensates for global rotation, with bendingof telescope components due to gravitation, or through thermal effects or wind load.
Typically, to optimally align primary and secondary mirror, the secondary mirror hast to
be adjusted in five degrees of freedom. It is extremely important that the rotary correctionis around the mirror vertex to avoid any alteration of the focal point.
The hexapod systems with six degrees of freedom in motion are installed behind thesubreflectors and allow for 6-D positioning with resolution in the submicrometer andarcsecond range.

9

MOTION|POSITIONING

Markets and Applications

BASIC RESEARCH, SCIENTIFIC INSTRUMENTATION
In synchrotron radiation sources, X-ray diffraction and reflections of the radiation can be used to investigate allkinds of material properties or interactions. Common to all of these applications are the requirements of very highprecision, a good time stability, and an excellent position repeatability. Hexapods are often the appropriate solution
due to their compact size and the relatively long travel ranges in 6 degrees of freedom.

A hexapod, designed by PI for use inhigh vacuum, positions the sample,
relative to the incident X-rays for an
in-situ investigation of the growth ofthin layers in high vacuum. (Image:
SURFACE systems+technology GmbH& Co. KG)

High-load hexapod positions achamber for laser welding titanium
aluminides in precisely the correct
angle to the synchrotron beam, in
EH3 experimental set-up of P07
beamline at PETRA III. (Image: PI /Helmholtz-Zentrum Geesthacht)

10

W W W. P I . W SIntroduction

56 motors, 16 motion controllers, and 20 tons weight make the system for Microscopy and Quality Assurance (MiQA). The unique system
integrates hexapods, rotation stages, goniometers, and a custom sample stage and will be used in a beamline for X-ray microscopy and thequalification of X-ray optics. Virtually all available PI technologies are combined here in a highly specialized solution providing the best
possible accuracy for this application, resulting in 80 nm at the tool center point over multiple stacked axes.

High stiffness is required to position thevacuum sample chamber (above) andattached detectors for 4-pi-measurementof X-ray diffraction results. The large basehexapod moves the entire structure in six
degrees of freedom and so positions it in
the synchrotron beam.

11

MOTION|POSITIONING

Custom Examples Picture Wall

Fast hexapod for loads to 60 kg

7 axes with large aperture: The hexapod integrates a rotation stage in the motion platform

Customized parallel-kinematics stage with
six degrees of freedom. The PIMag® linear
motors ensure high dynamics and precision
as required in optical alignment or fiber alignment. The solution is based on 3 XY stages
which are driven by linear motors that allow
high dynamics for the precision alignment.
The SpaceFAB parallel kinematic allows avery flat design with long strokes in x and y.
In comparison to a PI Hexapod, the footprintof the SpaceFAB is relatively large, and thehexapod is better suited for longer verticalstrokes.
Low-profile hexapod design for precisionorientation of laminar payloads to 200 kg, e.g.
of inspection and assembly systems in LCD
productions or the positioning of patients inmedical engineering. The design avoids all
moving cables, the controller is integrated.

12

W W W. P I . W SIntroduction

This miniature hexapod was developed on the basis of fast PILine® ultrasonic motors toenable fast motion in all six spatial directions (three linear, three rotational). The parallelkinematic SpaceFAB design makes a particularly low overall height of only 80 mm possible.
The individual axes can be commanded with up to 120 mm/s.

Piezo hexapod for fine adjustment
and active, dynamic error correction

Hexapod for loads up to 500 kg,
absolute encoders

Weather-resistant hexapod for
astronomy, precision 6-axis positioner for outdoor applications

UHV-compatible miniature piezo
hexapod. High-precision positioning
even in strong magnetic fields

13

MOTION|POSITIONING

Custom Examples Picture Wall

Heavy-duty hexapod for a loadof 250 kg, clear aperture 800 mm ØLong-range linear stage positions
a 6-axis low-profile parallel-kinematicSpaceFAB on top, UHV to 10 –7 hPa

Hexapod for loads up to 1.5 tons,
vacuum-compatible to 10–6 hPa

14

W W W. P I . W S

Hexapod with long travel ranges
up to 240 mm in X and Y

Introduction

Impact of the Drive Technology

Drivetrain

Ideal for …

Brushless or brushed DC
servo or stepper motorwith and without gearhead

Why use parallel kinematics
with this drive principle?

■

Positioning with sub-μm-accuracy■

Miniaturization: Compact stages

6-axis positioning with high accuracy, e.g.,sample positioning in laboratories andbeamline experiments, ﬁber alignment,ﬁber-to-chip alignment, stable test systems,
high-precision mounting ﬁxtures
Motion simulation, precision following ofspeciﬁed trajectories

Q-Motion® piezo inertia
drive

■

■

®

PiezoWalk piezo stepping
drive

PIMag® voice coil drive

PIMag® linear motor

PILine® ultrasonic piezomotor

Piezo stack actuatorin multilayer or pressing
technology

Nanometer-precision and log-term stable
positioning
Quasistatic applications with low to medium
holding force

Very compact designs
Vacuum and nonmagnetic environments,
sample positioning e.g., in x-ray tomography■

Miniaturization: very compact stages■

Affordable positioning of small loads■

Nanometer-precision positioning

Compact designs

Quasistatic applications with high holdingforce

Vacuum and nonmagnetic environments■■

Travel ranges up to a few mm■

Coarse and ﬁne adjustment■

Force generation■

Active vibration insulation■

Operation with constant low velocity■

Positioning with sub-μm-accuracy■

Fast step-and-settle■

Scan mode with high velocities■

Miniaturization: Very compact stages■

Positioning with sub-μm-accuracy■

Fast step-and-settle■

Scan mode with high velocities■

Positioning with sub-μm-accuracy

Compact designs■

Fast step-and-settle

Vacuum and nonmagnetic environments■

Scan mode with high velocities■

Operation with constant low velocity■

Nanometer-precision positioning withhigh dynamics■

Lever-ampliﬁed and guided systems■

Piezo scanners■

Fine adjustment■

Force generation■

Active vibration insulation■

Miniaturization: Very compact stages

Automatic test cycles with high accelerationand high velocity
Motion simulation with high frequencies,
precision following of speciﬁed trajectories
Virtually unlimited travel ranges. Automatic
test cycles with high acceleration and highvelocity
Motion simulation with high frequencies,
precision following of speciﬁed trajectories

Active vibration damping on 6 axes
Vacuum and nonmagnetic environments

15

MOTION|POSITIONING

Reasons for Choosing a PI Hexapod System

Hexapod Key Features

Precise Positioning of Loads from 2 kg to 2000 kg■

Large central aperture■

Three linear axes, three rotational axes of motion■

Low moving mass, low inertia■

Excellent dynamic behavior, fast step-and-settle■

Minimized axis crosstalk motion■

Very good repeatability

PI hexapods area always used when highly precise motion inseveral degrees of freedom is required. They position the loads
on six axes in space, three linear and three rotary. Dependingon their design, Hexapods can position loads from several kg up
to several tons in any spatial orientation, in other words independently of the mounting orientation and with submicrometer
precision.

■

Small installation space

Compact Positioning System with 6 Degrees of Freedom■High stiffness■

Stable, virtual pivot point that can be freely definedin space■

Reference system (Work, Tool) can be quickly andeasily changed■

Position input via Cartesian coordinates, coordinatetransformation handled by the controller

Hexapod platforms are used for precision positioning and alignment of loads in all six degrees of freedom, three linear axes,
and three rotational axes Hexapods have a parallel-kinematics
structure, i.e. , the work piece is actuated simultaneously by multiple actuators, rather than taking a stacked approach. The parallel
arrangement of the actuators optimizes the overall system stiffness and allows for a large central aperture.

■

Supports motor brakes and absolute-measuring
sensors with BiSS interface

16

W W W. P I . W SIntroduction

Virtual Pivot Point and User-Defined Coordinate Systems
The pivot point of the hexapod can be freely defined. To adapt
the trajectory perfectly to the requirements of the application, it
is possible to define various coordinate systems which refer, forexample, to the position of workpiece or tool. This offers great
advantages for applications in industrial automation, and forfiber alignment. Coordinate systems can be switched with one
simple command.
Stacked or Parallel-Kinematic Motion Platforms?
In a parallel-kinematic hexapod all drives act on a single moving
platform, which results in a much more compact design thanpossible with stacked systems. Hexapods feature a high stiffness,therefore they can be mounted in any orientation and there ispractically no settling time when the target position has beenreached. As only one platform is moved, the overall moved mass
is lower if compared with a stacked or nested positioning system,
resulting in lower inertia and therefore higher dynamics, whichis the same for all motion axes.

Compared to serial or stacked systems, hexapods have an improved path accuracy, higher repeatability and flatness of travel.
Cable management is not an issue as PI hexapods only need two
cables to connect to the controller.
Compared to a serial robot, hexapods show a much better relation of payload to operating weight.
Serial motion and positioning platforms have their advantages
in the high modularity which allows for individual, if required
asymmetric design of the moving axes. Motion control, especially the homing procedure, is simpler with no coordinatetransformation required. On the other hand, positioning errorsof stacked systems are adding up and may affect the attainable
overall accuracy.

The parallel-kinematic SpaceFAB designgnallows for an asymmetric design of theemotion axes with a very low profile. In thisway, e.g. one linear axes may be longerr todeliver a workpiece or to position a sample
mple
in the test area. The available workspacece
for the other axes remains the same.

17

MOTION|POSITIONING

EtherCAT® Connectivity

PLC/CNC(Fieldbus
Master)Cartesian
NominalPosition

Cartesian
ActualPositionPI
Hexapod

PI Hexapod Controller
Calculation of
Inverse Kinematics
Fieldbus Slave
Interface

Transformationof Encoder Values
to Cartesian
Coordinates

Fine Interpolation
Motor
Controller with
Speed/Rotation
Angle Control

The controller transmits and receives Cartesian position data regularly.
The typical cycle time is 1 ms.

Hexapod Motion Controllers provide EtherCAT® Connectivity

Communication between the PLC and the Hexapod Controller

Real-time fieldbus interfaces are often used on automated production lines. Real time means that not only the transmission
itself is secured but also the chronological sequence. Thatmeans that commands reach the individual devices in exactly the same sequential and chronological order that they weretransmitted. Currently, the hexapod controllers support EtherCAT®. The required coordinate transformation for parallel kinematics are performed by the hexapod controller and do notaffect the PLC.

The high-level PLC operates in so-called CSP mode (Cyclic Synchronous Position Mode) and communicates with the hexapod
controller via EtherCAT®. As master, it specifies the target positions or trajectories of the individual axes as Cartesian target
coordinates in space and also reports the actual positions backto the fieldbus interface.
All other calculations required to command the parallel-kinematic six-axis system are done by the hexapod controller, i.e.,transforming the target positions from Cartesian target coordinates into drive commands for the individual drives. On thebus, the hexapod system acts as an intelligent multi-axis drive.

18

W W W. P I . W SIntroduction

PI Makes Hexapod Start Up Easy

The PI hexapod system is ready for operation immediately after plugging

Every hexapod is delivered as a complete and factory-qualified
system consisting of mechanics and controller ready for operation. The scope of delivery includes all communication cables
and all connection cables as well as mounting material, software
package and the full user documentation.

In addition, PI Hexapods come with their own specific “Software Tools for Hexapods” such as the Hexapod Simulation Toolto calculate forces and workspace, and PIVeriMove to consider
space restrictions. See the detailed description on p. ##Individual System Measurement Log Provides Safety

Extensive Software Package Included
PI provides PIMikroMove host software with graphical interface
to make the start-up as easy and convenient as possibly. Even
if several positioning systems are combined or different drive
systems need to interact, all axes can be handled from one display window.
All connected controllers and axes are displayed and can becommanded in the same window, independently of the drive
principle, and the number and configuration of the axes. You
only need to enter your parameters into the application to avoid
programming altogether.
PI software also supports a number of text-based languages, has
its own NI LabVIEW, Python and MATLAB drivers, and the software is compatible with Windows, Linux, and OSX. The mostrecent software version is always available for download fromthe PI homepage.

Every Hexapod system is supplied with individual measurement
and test protocols. The protocols include measurements coveringboth the entire travel range as well as individual sections. These
measurements are performed with calibrated measurement
devices such as interferometers and autocollimator based on astandardized procedure.
The following data can be found in the protocols:■

Positioning accuracy with motion in X, Y and Z,■

Unidirectional repeatability of a position with motionin X, Y and Z,■

Backlash with motion in X, Y and Z,■

Crosstalk in Z with motion in X and Y.

19

MOTION|POSITIONING

Factory-Testing at PI

Laser interferometers measure the position exactly to the nanometer

For PI, each individual measurement and qualification is an instrument for
quality assurance. Automated qualification routines before dispatching ensurethat the hexapod performance is well within the committed specifications.
Traceable, calibrated measuring equipment
PI uses high-resolution interferometers from leading manufacturers for precision
path and length measuring that are accurate to within a few nanometers. Depending on the angular range, angle measurements are made with autocollimators,
inclinometers, incremental rotary encoders or interferometers. For qualifying
multi-axis systems such as hexapods special measuring equipment such as
3-D coordinate measuring machines and a 3-D laser tracker.
The device is capable of lifting and rotating
systems with a maximum weight of 7000 kg
and up to 2 m diameter.

Installing and qualifying positioning systems weighing several tons
PI operates a heavy duty hall at its location in Karlsruhe for the assembly andmeasurement of masses up to five tons. A ground granite slab with a smoothness of 3.8 μm acts as assembly area. Air-cushioning elements also decouple
the granite slab against external vibration. This allows precise alignment of theaxes of a positioning system even during assembly.
To allow qualification of the behavior and specifications of heavy duty hexapods in a customer-relevant installation environment, a special lifting androtating device is available. The lifting and rotating equipment allows infinite
rotation of payloads up to seven tons around 360°. As both the product to bemeasured and the measuring device are mounted, PI ensures that only theactual motion of the products is measured.

20

W W W. P I . W SIntroduction

The PI Group – A Strong Partner
for Industry and ResearchOver the last four decades, PI (Physik Instrumente) has developed into the leading manufacturer of nanopositioning technology. The key element and motivation of the entrepreneurial
behavior have always remained the same: Finding the best possible solution for the customer.
PI is well known for the quality of its products and has been one of the leading players in the
global market for precision positioning technology for many years. One of the most importantbuilding blocks for this is the team spirit within the international PI family, which is based on
mutual understanding and support that goes beyond international borders and functional
restrictions.
PI is a privately owned company with healthy growth, more than 1000 employees worldwide
and a flexible, vertically integrated organization, which enables PI to fulfill almost any request
in the field of innovative precision positioning technology. The foremost priority for PI is tobe a reliable and highly qualified partner for the customer.

21

MOTION|POSITIONING

The PI Group Milestones
A Success Story

PI has been developing and manufacturing
standard and OEM products with piezo or
motor drives for more than 40 years. Continuous development of innovative drive concepts, products, and system solutions andmore than 200 technology patents distin-

guish the company history today. In addition
to four locations in Germany, the PI Group isrepresented internationally by fifteen sales
and service subsidiaries. PI is a privately
owned company with healthy growth andmore than 1000 employees worldwide.

Market introductionof the PICMA®
multilayer piezo
actuators

Market introductionof PILine® ultrasonicpiezomotors

Foundation of PI Ceramicin Thuringia, Germany,
cornerstone for market
leadership in nanopositioning technology

Founding year
of PI

2002

2 0 01

1998

1994

1992

1993

Market introduction of capacitive
position sensors, implementationin piezo-based nanopositioningsyystemssystems

1991

1987

1970

Market introductionof six-axis parallelkinematic positioning
systems (Hexapods)

Market introductionof digital
control electronics
Newsubsidiaryin the USA

New
subsidiaryin Japan

New subsidiaries
in Great Britain
and France

22

W W W. P I . W S

Newsubsidiary
in ItalyNew
subsidiaryin China

Introduction

2 0 172018Market introductionof the magnetic
PIMag® direct drives

2014

Acquisition ofmajority sharesin ACS Motion
Control

Introductionof air bearings
Acquisitionof Nelson
Air Corp., USA

2 0 11

2007

2004

Foundationof PI Innovation

2016

Acquisitionof majority sharesin miCos GmbH,
Eschbach, Germany

2015

Market introductionof the NEXLINE®
high-performancepiezo linear drives

PIRe active
PIRestshim piezo
techtechnology
Market introductionof Q-Motion®
and PiezoMikes

Engineered
motionplatforms

Market introductionof NEXACT®
piezo linear drives
New subsidiaries
in Korea andSingapore

New subsidiaries
in Taiwan and theNetherlands

23

MOTION|POSITIONING

Expert Consulting

Time for qualified technical consultation is crucial for the success of high-tech projects

The PI Group can respond precisely to what customers want: Specific requirements can often only be satisfied by customized solutions – solutions that canbe found by unconventional and creative thinking. Together with the customers,
PI plans and realizes individual solutions for the most varied applications andintegration levels. And that means that PI’s customers can always be sure thatthey will get the best solution every time.
Customers directly benefit from:
Highly Qualified Consultancy Through Trained Specialists
Individual advice often is key to solve a complex problem. PI sales engineers
are ready to come on site with all the time necessary for a solid understandingof the topic. Or they will gladly meet at the PI head office. All PI sales engineers
have a background in natural sciences or engineering, and have up to 20 yearsof experience in optical, micro- or nanopositioning technology.

24

W W W. P I . W SInternational Support
PI subsidiaries and distributors in many
countries across the world guarantee global
support – a decisive advantage, especiallyfor globally operating customers. PI has its
own sales and service offices in all important
markets. Moreover, the company maintains
testing devices for nanometrology on threecontinents. PI Shanghai and PI USA haveadditional development and manufacturingresources that allow rapid local reaction tocustom-engineered specifications.

Introduction

Engineering Design Expertiseand Customization

Unique Technological Breadth
The technological diversity of the PI Group is unrivalled all over theworld. PI develops, manufactures, and qualifies all its core technologies itself. PI is therefore not dependent on components available on
the market. That puts PI in a position to offer its customers the mostadvanced products for motion and positioning tasks – without technological restriction.

A software simulation helps to check and determine theexact requirements needed for a hexapod. The resulting
forces, travel ranges, and installation space etc. then flow into
the selection of components and the following construction.
The geometrical date is also transferred to the corresponding
controller. All in all, you get a perfectly matched six-axis
positioning system.

Customized Solutions
With this background, PI develops positioning solutions with innovative
drive technologies for high-tech applications worldwide. PI covers thewhole motion range from finger-tip sized nanopositioners to large-scalestages with long travel ranges, through their plethora of different driveand guiding systems.
Core Technologies■

In-house manufacturing of piezo components and piezo actuators■

Magnetic direct drives: linear motors and voice coils■

Air bearings, magnetic and flexure guides■

Comprehensive range of piezo motor technologies■

Nanometrology sensors■

Parallel-kinematic systems for positioning in six axes (Hexapods)■

Motion control technology■

Software25

MOTION|POSITIONING

Production Capabilities

PI’s flexibility in serial production allows for fast adaptation of both processes and quantities

A modern production management and an integrated management
system allow PI to guarantee the high quality of its products, processes,
and services. The continual improvement of organization and processes
is an integral part of the corporate culture. KAIZEN workshops and an
active innovation management are important elements for achieving
this.
The production processes for the standard range are made flexible by
the fractal production structure and it is therefore possible to manufacture even large series with full process control. Active, system-based
requirements management makes it possible to dispense with comprehensive storage facilities.
Vertical Production Range and Production Capacity
The product spectrum ranging from the two-ton hexapod to the 10-gram
nanopositioner requires PI to have the equipment and technologies at
its disposal that allow the systems to be manufactured, assembled, andqualified.

26

W W W. P I . W S■

13,000 m² of overall production space■

5,000 m² for cleanrooms■

Air-conditioned and vibration-proof measuringconditions■

Vacuum chambers for startup and residual gas
analysis■

Measuring technology with traceable, calibrated
measuring equipment■

Monitoring of piezo actuator technology frommaterial composition to final inspection■

In-house manufacturing of positioning sensors■

Production hall with measuring technology forheavy loads■

Fractal production organization

Introduction

Vacuum Know-How

PI offers high-precision solutions for positioning in vacuum conditions to 10–10 hPa.
Positioning solutions in a vacuum follow clearly defined constraints. This applies tothe limited installation space, as well as prevention of contamination and excessive
heat input.
Selection of the optimum drive technology for the respective application and themechanical design must be matched exactly to the required load capacity andvelocity as well as the intended operating and planned duty cycles.
The handling regulations for vacuum positioning systems are just as importantt as
the design principles. Cleanrooms are available for assembling larger parts. Suitableable
packaging and the corresponding instructions for the recipient are part of shipping.
g.
Vacuum chambers are available in several sizes with vacuum levels down to 10–10 hPa,
where start-up and measurement of outgassing, but also interferometric measuring
g ofposition accuracy under real operating conditions is possible.

At PI, several vacuu
umchambers are available
in various sizes

27

MOTION|POSITIONING

From 1-off to Series:
OEM Users Beneﬁt From Maximum Flexibility

PI serves both the research and industrial markets. The complete control over the design and manufacturing process provides our customers with significant competitive advantages. Optimized processes
allow PI to deliver customized products in quantities up to several 100,000 units per year at low cost andright on time. The range of OEM products offered by the PI Group varies widely, ranging from “bare”
actuators and sensors to highly integrated parallel-kinematic positioning systems. Evaluation of preproduction run samples, test procedures, production processes and quality management are all includedin the development process.
Services■

Global account management: Close proximity to the customer thanks to international presence■

Risk assessment from design to delivery■

Depending on the task: From the drive to the turnkey system■

Copy exactly policy■

Preparation of internal and external certification■

Production of series of several 10,000 units in the shortest time■

Sustainable spare parts service■

Manufacturing and testing capacities from functional samples to mass production

Standardized performance control with full documentation of individual measurement charts

28

W W W. P I . W SIntroduction

Global Service and After-Sales

On-site training is key to optimize and maximize the potential of new PI systems

Start-Up, User Training and Life Long Support

Contracted Services

PI is dedicated to supporting its customers right from the initial consultation
through to when a customer has purchased a PI system. Beyond that, PI’s services
division is committed to ensuring that every aspect of owning a PI system iscatered for.

Customers subscribing to Contractual Support Services will receive commitment fromPI to achieving agreed Service Levels. These
include responding to the customer’s firstcontact and providing remote technicalsupport, through to response times for a PI
expert to be on site, either to repair or replacea defective unit.

Global Coverage
Supported by 4 Global Service Hubs in Asia, China, Europe and USA, with field
product specialists working from these hubs, PI is able to support all technologies and customer applications via this global services team.
PI’s Standard On-Site Services■

Set up and Commissioning – On-site support to un-box, set-up andcommission the PI system■

Training Program – User training on software and programming,
through to optimization of system performance■

Maintenance Systems Health Check – Preventative maintenance toprolong the life of the motion device■

Support – Ongoing remote and on-site support to maximize system
uptime and provide maintenance for the whole life of any system

Extended Warranty
Most customer applications require PI’s
systems to be operational beyond the standard warranty period. Extending the warranty
for additional year(s), is simply extending thecustomers peace of mind and PI’s commitment that the product will not fail due to poor
workmanship or faulty materials. Shoulda customer’s system then fail due to these
conditions, PI will cover the costs to repair or
replace it.

29

MOTION|POSITIONING

Compact Hexapods

30

W W W. P I . W SCompact Hexapods

Compact Hexapods ..................................................................................................................................................................

32

H-811.I2/I2V 6-Axis Miniature Hexapod .........................................................................
H-811.F2 6-Axis Miniature Hexapod ..............................................................................
H-810 6-Axis Miniature Hexapod ...................................................................................
H-825 6-Axis Hexapod ...................................................................................................
H-824 6-Axis Hexapod ...................................................................................................
H-206 6-Axis Alignment System ....................................................................................

32
36
40
44
46
48

Miniature Parallel Kinematics / Hexapods ..............................................................................................................................

50®

Q-821 Q-Motion Miniature SpaceFAB Robot ................................................................
Q-845 Q-Motion® SpaceFAB ..........................................................................................

50
52

31

MOTION|POSITIONINGH-811.I2/I2V 6-Axis Miniature Hexapod
Fast, Compact, and Highly Precise■

Travel ranges to ±17 mm / ±21°■

Load capacity to 5 kg■

Repeatability to ±0.06 μm■

Velocity to 20 mm/s■

Superior lifetime■

Brushless DC motor (BLDC)■

Vacuum-compatible versions available

Parallel-kinematic design for six degrees of freedom making it significantly
more compact and stiff than serial-kinematic systems, higher dynamic range,
no moved cables: Higher reliability, reduced friction. Vacuum-compatible version to 10–6 hPa available.
Brushless DC motor (BLDC)
Brushless DC motors are particularly suitable for high rotational speeds. They
can be controlled very accurately and ensure high precision. Because theydispense with sliding contacts, they run smoothly, are wear-free and therefore
achieve a long lifetime.

Applications>> Parallel Kinematics, Hexapods■ Optics alignment■ Micro assembly■ Fiber alignment■ Sample positioning>> Vacuum-Compatible Versions■ Photonics testing

Technology Glossary ...................... page 124

32

W W W. P I . W S

Unit

Compact Hexapods

H-811.I2 / .I2V**

Tolerance

I2: High velocity
I2V: Vacuum compatible to 10 –6 hPa
Motion and positioning
Active axes

X, Y, Z, θX, θY, θZ

Travel range* in X, Y

±17, ±16mm

Travel range* in Z

±6.5

mm

Travel range* in θX, θY±10, ±10°

Travel range* in θZ±21°

Actuator design resolution

5

nmMin. incremental motion X, Y

0.2

μm

typ.

Min. incremental motion Z

0.08

μm

typ.

Minimum incremental motion θX, θY

2.5

μrad

typ.

Minimum incremental motion θZ

5

μrad

typ.

Backlash X, Y

0.2

μm

typ.

Backlash Z

0.06

μm

typ.

Backlash θX, θY

2

μrad

typ.

Backlash θZ

4

μrad

typ.

Repeatability X, Y

±0.15

μm

typ.

Repeatability Z

±0.06

μm

typ.

Repeatability θX, θY

±2

μrad

typ.

Repeatability θZ

±3

μrad

typ.

Max. velocity X, Y, Z

20 / 10mm/s

Max. velocity θX, θY, θZ

500 / 250

mrad/sTyp. Velocity X, Y, Z

10 / 5mm/s

Typ. Velocity θX, θY, θZ

240 / 120

mrad/sStiffness X / Y

0.7

N/μm

Stiffness Z

8

N/μm

Load capacity, horizontal base plate

5

kg

max.

Load capacity, base platein any orientation

2.5

kg

max.

Holding force, power off,horizontal base plate

15

N

max.

Holding force, power off,base plate in any orientation

2.5

N

max.

Motor type

BLDC motor

Mechanical properties

Miscellaneous
Operating temperature range

0 to 50

Material

Stainless steel, aluminum

°C

Mass

2.2

kg

±5 %

Cable length

0.5 + 3 / 3 (air) + 2 (vacuum)m±10 mmRecommended controller

C-887.5x

Technical data specified at 20±3 °C.
* The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent. The data for each axis
in this table shows its maximum travel range, where all other axes and the pivot point are at the reference position.
** For continuous operation in a vacuum, restrictions on operating parameters may be necessary due to heat generation.
Ask about customized versions.

33

MOTION|POSITIONINGH-811.I2, dimensions in mm

34

W W W. P I . W SCompact Hexapods

35

MOTION|POSITIONINGH-811.F2 6-Axis Miniature Hexapod
Ideal
ea foro Fibere Alignment
g
e t

■

Travel ranges to ±17 mm / ±21°■Compact design■

Removable magnetic plate■

High dynamics and precision■

Freely programmable, virtual pivot point■

Superior lifetime■

Brushless DC motor (BLDC)

Parallel-kinematic design for six degrees of freedom making it significantly
more compact and stiff than serial-kinematic systems, higher dynamic range,
no moved cables: Higher reliability, reduced friction.
Brushless DC motor (BLDC)
Brushless DC motors are particularly suitable for high rotational speeds. They
can be controlled very accurately and ensure high precision. Because theydispense with sliding contacts, they run smoothly, are wear-free and therefore
achieve a long lifetime.

F-206.TMU Additional removable magnetic plate,
for fast replacement of different assemblies,
available as accessory

Removable magnetic plate
Accelerate your workflows. The next workpiece can be prepared parallel to our
automated process step. The removable magnetic plate can be disassembled
quickly without tools and subsequently reassembled accurately each time.

Applications>> Parallel Kinematics, Hexapods■ Fiber alignment■ Photonics alignment

Technology Glossary ...................... page 124

36

W W W. P I . W S

Unit

Compact Hexapods

H-811.F2

Tolerance

Motion and positioning
X, Y, Z, θX, θY, θZ

Active axes
Travel range* in X, Y

±17, ±16mm

Travel range* in Z

±6.5

mm

Travel range* in θX, θY,±10, ±10°

Travel range* in θZ±21°

Actuator design resolution

5

nmMin. incremental motion X, Y

0.2

μm

Min. incremental motion Z

0.08

μm

typ.

Minimum incremental motion θX, θY,

2

μrad

typ.

typ.

Minimum incremental motion θZ

3

μrad

typ.

Backlash X, Y

0.2

μm

typ.

Backlash Z

0.06

μm

typ.

Backlash θX, θY,

2

μrad

typ.

Backlash θZ

3

μrad

typ.

Repeatability X, Y

±0.15

μm

typ.

Repeatability Z

±0.06

μm

typ.

Repeatability θX, θY,

±2

μrad

typ.

Repeatability θZ

±3

μrad

typ.

Max. velocity X, Y, Z

20

mm/s

Max. velocity θX, θY, θZ

500

mrad/sTyp. Velocity X, Y, Z

10

mm/s

Typ. Velocity θX, θY, θZ

240

mrad/sScanning time of spiraled area scan 500 μm Ø**<2sScanning time of spiraled area scan 100 μm Ø**

<0.5

s

Scanning time of spiraled area scan 10 μm Ø**

<0.2

s

Alignment

Mechanical properties
Stiffness X / Y

0.7

N/μm

Stiffness Z

8

N/μm

Load capacity(horizontal base plate / any orientation)

5 / 2.5kg

max.

Holding force, power off(horizontal base plate / any orientation)

12 / 2N

max.

Motor type

BLDC motor

Miscellaneous
Operating temperature range

0 to 50

Material

Stainless steel, aluminum

°C

Mass

2.2

kg

±5 %

Cable length2m±10 mmRecommended controller

C-887.5x

Technical data specified at 20±3 °C.
* The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent. The data for each axis
in this table shows its maximum travel range, where all other axes and the pivot point are at the reference position.
** Typical time period to scan the full area and move to the maximum intensity
Ask about customized versions.

37

MOTION|POSITIONINGH-811.F2, dimensions in mm

38

W W W. P I . W SCompact Hexapods

39

MOTION|POSITIONINGH-810 6-Axis Miniature Hexapod
High Precision in the Smallest Space■

Travel ranges to 40 mm / 60°■

Load capacity to 5 kg■

Repeatability to ±0.1 μm■

Velocity to 2.5 mm/s■

Brushless DC motor (BLDC)■

Works in any orientation■

Virtual pivot point

Parallel-kinematic design for six degrees of freedom making it significantly
more compact and stiff than serial-kinematic systems, higher dynamic range,
no moved cables: Higher reliability, reduced friction.
Brushless DC motor (BLDC)
Brushless DC motors are particularly suitable for high rotational speeds. They
can be controlled very accurately and ensure high precision. Because theydispense with sliding contacts, they run smoothly, are wear-free and therefore
achieve a long lifetime.

Applications>> Parallel Kinematics, Hexapods■ Mirror positioning

Technology Glossary ...................... page 124

40

W W W. P I . W S

Unit

Compact Hexapods

H-810.D2

Tolerance

Motion and positioning
Active axes

X, Y, Z, θX, θY, θZ

Travel range* X, Y

±20

Travel range* Z

±6.5

mm

Travel range* θX, θY±10°Travel range* θZ±30°Actuator design resolution40

nmMin. incremental motion X, Y

1

μm

typ.

Min. incremental motion Z

0.5

μm

typ.

Minimum incremental motion θX, θY

15

μrad

typ.

Minimum incremental motion θZ

30

μrad

typ.

Backlash X, Y

1

μm

typ.

Backlash Z

0.5

μm

typ.

Backlash θX, θY

15

μrad

typ.

Backlash θZ

30

μrad

typ.

Repeatability X, Y

±0.5

μm

typ.

Repeatability Z

±0.1

μm

typ.

Repeatability θX, θY

±3

μrad

typ.

Repeatability θZ

±15

μrad

typ.

Max. velocity X, Y, Z

2.5

mm/s

Max. velocity θX, θY, θZ

60

mrad/sTyp. Velocity X, Y, Z

2

mm/s

Typ. Velocity θX, θY, θZ

50

mrad/sLoad capacity (horizontal base plate /any orientation)

5 / 2.5kg

max.

Holding force (horizontal base plate)

15

N

max.

Motor type

Brushless DC motormm

Mechanical properties

Miscellaneous
Operating temperature range

0 to 50

Material

Stainless steel, aluminum

°C

Mass

1.7

kg

±5 %

Cable length2m±10 mmRecommended controller

C-887.5x

Technical data specified at 20±3 °C.
* The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent. The data for each axis
in this table shows its maximum travel range, where all other axes and the pivot point are at the reference position.
Ask about customized versions.

41

MOTION|POSITIONINGH-810, dimensions in mm

42

W W W. P I . W SCompact Hexapods

43

MOTION|POSITIONINGH-825 6-Axis Hexapod
Compact Design, for Loads to 30 kg■

Load capacity to 30 kg, self-locking■

Travel ranges to ±27.5 mm,
rotation range to ±11.5°■

Actuator resolution to 8 nm■

Minimum incremental motion to 0.25 μm
in X, Y, and Z■

Repeatability to ±0.1 μm / ±2 μrad■

BLDC motors and absolute encoders

H-825, dimensions in mm

Applications>> Absolute Encoder■ Micro manipulation■ Optics alignment■ Micro assembly■ Sample positioning>> Parallel Kinematics, Hexapods

Technology Glossary ...................... page 124

44

W W W. P I . W S

H-825.D2A

High load capacity
and holding force,no homing requiredHigh velocity,
no homing required

BLDC gear motor withabsolute encoder

BLDC motor withabsolute encoder
X, Y, Z, θX, θY, θZ

Unit

Compact Hexapods

H-825.G2A

Tolerance

Motion and positioning

Active axes

X, Y, Z, θX, θY, θZ

Travel range in X, Y *±27.5; ±25±27.5; ±25mm

Travel range in Z *

±14

±14

mm

Travel range in θX, θY *±11.5; ±10.5±11.5; ±10.5°

Travel range in θZ *

±19

±19

°

Actuator design resolution

0.008

0.25

μm

Minimum incremental motion in X, Y, Z

0.3; 0.3; 0.25

1; 1; 0.5μm

Minimum incremental motion in θX, θY, θZ

3.5; 3.5; 47; 7; 12μm

Backlash in X, Y

3

1.5

μm

Backlash in Z

1

1

μm

typ.

Backlash in θX, θY

20

15

μrad

typ.

Backlash in θZ

25

25

μrad

typ.

Repeatability X, Y

±0.5; ±0.25

±0.5

μm

typ.

Repeatability in Z

±0.1

±0.15

μm

typ.

Repeatability in θX, θY±2±2; ±1.5

μrad

typ.
typ.

typ.
typ.

Repeatability in θZ

±2.5

±3

μrad

Max. velocity in X, Y, Z

2.5

25

mm/s

Max. velocity in θX, θY, θZ

27

270

mrad/sTyp. velocity on X, Y, Z

2

20

mm/s

Typ. velocity on θX, θY, θZ

5.5

55

mrad/sStiffness in X, Y

1.7

1.7

N/μm

Stiffness in Z

7

7

N/μm

Load capacity (horizontal base plate /any orientation)

30 / 105 / 2.5kg

max.

Holding force, power off(horizontal base plate / any orientation)

100 / 50

10 / 5N

max.

Motor type

BLDC gear motor

BLDC motor

Mechanical properties

Miscellaneous
Operating temperature range–10 to 50–10 to 50

Material

Aluminum

Aluminum

Mass

10

10

Recommended controller

C-887.5x

C-887.5x

°C
kg

±10 %

Technical data specified at 20±3 °C.
* The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent. The data for each axis
in this table shows its maximum travel range, where all other axes and the pivot point are at the reference position.
Ask about customized versions.

45

MOTION|POSITIONINGH-824 6-Axis Hexapod
Compact and Precise■

Load capacity to 10 kg, self-locking version■

Travel ranges to 45 mm / 25°■

Min. incremental motion to 0.3 μm■

Repeatability to ±0.1 μm / ±2 μrad■

Velocity to 25 mm/s■

Vacuum-compatible versions available

H-824, dimensions in mm

Applications>> Parallel Kinematics, Hexapods■ Micro manipulation■ Optics alignment■ Micro assembly■ Sample positioning>> Vacuum-Compatible Versions

Technology Glossary ...................... page 124

46

W W W. P I . W S

H-824.D2 / D2V**

for higher resolution and load
G2V: Vacuum compatible to10–6 hPa

for higher velocity
D2V: Vacuum compatible
to 10–6 hPa

Unit

Tolerance

Motion and positioning

Active axes

X, Y, Z, θX, θY, θZ

X, Y, Z, θX, θY, θZ

Travel range* in X, Y

±22.5

±22.5

mm

Travel range* in Z

±12.5

±12.5

mm

Travel range* in θX, θY

±7.5

±7.5

°

Travel range* in θZ

±12.5

±12.5

°

Actuator design resolution

0.007

0.5

μm

Minimum incremental motion X, Y, Z

0.3

2; 2; 1μm

Minimum incremental motion θX, θY, θZ

3.5

12; 12; 14

μrad

typ.

Backlash X, Y

2/5

1.5 / 3μm

typ.

Backlash Z

0.7 / 1.5

1 / 1.5μm

typ.

Backlash θX, θY

14 / 30

15 / 20

μrad

typ.

Backlash θZ

17 / 45

30 / 60

μrad

typ.

Repeatability X, Y

±0.25 / ±0.4

±0.5

μm

typ.

Repeatability Z

±0.1

±0.15

μm

typ.

Repeatability θX, θY

±2

±3

μrad

typ.

Repeatability θZ±2 / ±3

±2.5

μrad

Max. velocity X, Y, Z

1 / 0.5

25 / 12.5mm/s

Max. velocity θX, θY, θZ

11 / 5.5

270 / 135

mrad/sTyp. Velocity X, Y, Z

0.5 / 0.2

10 / 5mm/s

Typ. Velocity θX, θY, θZ

5.5 / 2.3

55 / 28

mrad/sStiffness X / Y

1.7

1.7

N/μm

Stiffness Z

7

7

N/μm

Load capacity, horizontal base plate

10 / 55 / 2.5kg

max.

Load capacity, base platein any orientation

5 / 2.5

2.5 / 1.25

kg

max.

Holding force, power off,horizontal base plate

100 / 50

15

N

max.

Holding force, power off,base plate in any orientation

50 / 25

5

N

max.

Motor typeDC gear motor

DC motortyp.

Mechanical properties

Miscellaneous
Operating temperature range–10 to 50–10 to 50

Material

Aluminum

Aluminum

°C

Mass

8

8

kg

±5 %

Cable length

3

3

m

±10 mmRecommended controller

C-887.5x

C-887.5x

Technical data specified at 20±3 °C.
* The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent. The data for each axis in this tableshows its maximum travel range, where all other axes and the pivot point are at the reference position.
** For continuous operation in a vacuum, restrictions on operating parameters may be necessary due to heat generation.
Ask about customized versions.

47

MOTION|POSITIONING

Compact Hexapods

H-824.G2 / G2V**

H-206 6-Axis Alignment System
Ideal for Fiber Alignment■

High-precision due to flexures■

Integrated scan routines for fiber optic alignment■

Repeatability 0.3 μm■

Velocity to 8 mm/s■

Freely programmable virtual pivot point■

Removable magnetic plate

H-206.F2, dimensions in mm

Applications>> Parallel Kinematics, Hexapods■ Fiber alignment■ Photonics alignment

Technology Glossary ...................... page 124

48

W W W. P I . W S

Unit

Compact Hexapods

H-206.F2

Tolerance

Motion and positioning
Active axes

X, Y, Z, θX, θY, θZ

Travel range* X–8 to 5.7mm

Travel range* Y

±5.7

mm

Travel range* Z

±6.7

mm

Travel range* θX

±5.7

°

Travel range* θY

±6.6

°

Travel range* θZ

±5.5

°

Actuator design resolution

33

nm

Minimum incremental motion X, Y, Z

0.5

μm

typ.

Minimum incremental motion θX, θY, θZ

2 (0.4”)

μrad

typ.

Repeatability X, Y, Z

0.3

μm

typ.

Repeatability θX, θY, θZ

6

μrad

typ.

Velocity X, Y, Z

8

mm/s

max.

Velocity X, Y, Z

2

mm/s

typ.

Load capacity (horizontal base plate)

1.5

kg

max.

Operating temperature range

5 to 35°C

Material

Aluminum

Miscellaneous

Mass

5.8

kg

±5 %

Cable length

3m±10 mmRecommended controller

C-887.5x

Technical data specified at 20±3 °C.
* The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent. The data for each axis in thistable shows its maximum travel range, where all other axes and the pivot point are at the reference position.
Ask about customized versions.

F-206.TMU Additional removable magnetic plate,
for fast replacement of different assemblies,
available as accessory

The H-206 includes rapid automatic scan routines forfast multi-axis alignment. The graphic shows 2-D opticalsignal intensity of a fiber optic component. Complete
device scan ensures detection of the global peak andprevents locking on to a local maximum.

49

MOTION|POSITIONING

Q-821 Q-Motion® Miniature SpaceFAB Robot
Piezo-Motorized Inertia Drive, only 80 mm Side Length

Q-821.140, dimensions in mm■

Six-axis microrobotics system■±6 mm travel range in X and Y, and ±3 mm
in Z■±6° rotation range in θX, θY, and ±16.5° in θZ■

1 nm sensor resolution■

Crossed roller guides, anti-creep

Applications■ Fine adjustment of the smallest

components during assembly■ Photonics / Alignment

Applications>> Parallel Kinematics, Hexapods>> Q-Motion® Piezoelectric Inertia Drive■ Microscopy■ Beamline systems■ Semiconductor technology■ Test laboratories

Technology Glossary ..................... page 124

50

W W W. P I . W S

Unit

Compact Hexapods

Q-821.140

Tolerance

Motion and positioning
Active axes

X, Y, Z, θX, θY, θZ

Integrated sensor

Incremental, optical,
direct measuring

Travel range in X, Y

±6mm

Travel range in Z

±3mm

Rotation range in θX, θY±6°Rotation range in θZ

±16.5

°

Sensor resolution

1

nm

Minimum incremental motionin X, Y

10

nm

typ.

Minimum incremental motion in Z

20

nm

typ.

Minimum incremental motion inθX, θY, θZ

0.9

μrad

typ.

Unidirectional repeatability in X

±40

nm

typ.

Unidirectional repeatability in Y

±70

nm

typ.

Unidirectional repeatability in Z

±200

nm

typ.

Backlash in X, Y

40

nm

Backlash in Z

80nm

Backlash in θX, θY

45

μrad

Backlash in θZ

25

μrad

Max. speed in X, Y

5

mm/s

Max. speed in Z

2

mm/s

Mechanical properties
Load capacity in X, Y

1

N

max.

Load capacity in Z
(base plate horizontal)

2

N

max.

Holding force in X, Y, Z, passive

3

N

Drive type

Piezoelectric inertia drive

Guide type

Crossed roller bearings

Miscellaneous
Connection

6x Sub-D 15 (m)Material

Stainless steel, aluminum

Mass without cable and connector

0.3

kg

±5 %

Cable length2m±10 mmRecommended electronics

C-886.31

51

MOTION|POSITIONING

Q-845 Q-Motion® SpaceFAB
High Precision and High Stiffness

Applications
components during assembly■ Photonics / Alignment

Applications

Six degrees of freedom■±7 mm travel range in X and Y, and ±5 mm
in Z■±7° rotation range in θX, θY, and ±8° in θZ■

10 N load capacity, center mounted■

Self-locking, no heat generation at rest■

Crossed roller guides, anti-creep■

Vacuum-compatible to 10–6 hPa

Bottom and side view of the Q-845.140, dimensions in mm.
The reference position corresponds to the center positionof all axes.

Top view of the Q-845.140, dimensions in mm.
The reference position corresponds to the center positionof all axes.

■ Fine adjustment of the smallest■>> Parallel Kinematics, Hexapods■ Microscopy>> Q-Motion® Piezoelectric Inertia Drive■ Beamline systems>> Vacuum-Compatible Versions■ Semiconductor technology■ Test laboratories

Technology Glossary ..................... page 124

52

W W W. P I . W S

Unit

Compact Hexapods

Q-845.140

Tolerance

Motion and positioning
Active axes

X, Y, Z, θX, θY, θZ

Integrated sensor

Incremental linear encoder

Travel range* in X, Y

±7

Travel range* in Z

±5mm

Rotation range* in θX, θY±7°Rotation range* in θZ±8°

Sensor resolution

1

nm

Minimum incremental motionin X, Y

6

nm

typ.

mm

Minimum incremental motion in Z

20

nm

typ.

Minimum incremental motionin θX, θY, θZ

0.9

μrad

typ.

Unidirectional repeatability in X, Y

±30

nm

typ.

Unidirectional repeatability in Z

±35

nm

typ.

Unidirectional repeatability in θX

±20

μrad

typ.

Unidirectional repeatability in θY

±10

μrad

typ.

Unidirectional repeatability in θZ

±6

μrad

typ.

Backlash in X, Y

40

nm

typ.

Backlash in Z

60

nm

typ.

Backlash in θX, θY

35

μrad

typ.

Backlash in θZ

20

μrad

typ.

Max. velocity in X, Y, Z

5

mm/s

max.

Max. angular velocity in θX, θY, θZ

50

mrad/smax.

Stiffness in X, Y

1

N/μm

Stiffness in Z

2

N/μm

Load capacity in X, Y

5

N

max.

Load capacity in Z
(base plate horizontal)

10

N

max.

Holding force, power off(base plate horizontal /any orientation)

20 / 10N

max.

Permissible torque in θX, θY, θZ

0.5

N·m

max.

Drive type

Piezoelectric Inertia Drive

Mechanical properties

Miscellaneous
Operating temperature range

0 to 40

Connection

6x Sub-D 15 (m)°CMaterial

Stainless steel, aluminum

Mass

1.9

kg

Mass without cable and connector

1.2

kg

±5 %

Cable length2m±10 mm±5 %Technical data specified at 20±3 °C.
Ask about custom designs!
* The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent.
The data for each axis in this table shows its maximum travel range, where all other axes and the pivot point are at the reference position.
For operation in a vacuum, we recommend a reduced duty cycle of 20 % and a maximum motor push / pull force of 30 % compared to a standard environment.
The intrinsic mass of the slider plate must be considered accordingly.

53

MOTION|POSITIONING

Precision Positioning Hexapods

54

W W W. P I . W S

56

H-850 6-Axis Hexapod ...................................................................................................
H-840 6-Axis Hexapod ...................................................................................................
H-820 6-Axis Hexapod ...................................................................................................

56
60
64

Positioning Hexapods for Loads over 250 kg ..............................................................................................................................

66

H-845 Heavy-Duty Hexapod ...........................................................................................

66

55

MOTION|POSITIONING

Precision Positioning
Hexapods

Positioning Hexapods for Loads up to 250 kg .........................................................................................................................

H-850 6-Axis Hexapod
For Loads up to 250 kg■

Load capacity to 250 kg■

Repeatability to ±0.2 μm■

Travel ranges to ±50 mm / ±30°■

Actuator resolution to 2.5 nm■

Variants with BLDC motors and absolute
encoders■

Works in any orientation

Parallel-kinematic design for six degrees of freedom making it significantly morecompact and stiff than serial-kinematic systems, higher dynamic range, no
moved cables: Higher reliability, reduced friction. Heavy-duty precision bearingsfor 24/7 applications.
Brushless DC motor (BLDC)
Brushless DC motors are particularly suitable for high rotational speeds. They
can be controlled very accurately and ensure high precision. Because theydispense with sliding contacts, they run smoothly, are wear-free and therefore
achieve a long lifetime.
Absolute encoder
Absolute encoders supply explicit position information that enables immediate
determination of the position. This means that referencing is not required
during switch-on, which increases efficiency and safety during operation.

Applications>> Absolute Encoder■ Part handling■ Automated alignment>> Parallel Kinematics, Hexapods■ Precise robotics■ Micromanipulation in vacuum>> Vacuum-Compatible Versions■ Astronomy

Technology Glossary ...................... page 124

56

W W W. P I . W S

H-850.H2A

H-850.G2A

H-850.H2 / H2V**

H-850.G2 / G2V**

Unit

Tolerance

For high duty
cycles, highprecision, highload capacity andholding force, nohoming required

For highduty cycles,
faster motion,
no homing
required

For high precision, high load
capacity andholding force
H2V: Vacuum
compatible to10–6 hPa

For faster motion
G2V: Vacuum
compatible to10–6 hPa

Active axes

X, Y, Z, θX, θY, θZ

X, Y, Z, θX, θY, θZ

X, Y, Z, θX, θY, θZ

X, Y, Z, θX, θY, θZ

Travel range* X, Y

±50

±50

±50

±50

Travel range* Z

±25

±25

±25

±25

mm

Travel range* θX, θY

±15

±15

±15

±15

°

Travel range* θZ

±30

±30

±30

±30

°

Sensor type

Absolute rotary
encoder

Absolute rotary
encoder

Incremental
rotary encoder

Incremental
rotary encoder

Actuator design
resolution

0.0025

0.025

0.005

0.05

μm

Min. incremental
motion X, Y

0.3

1

0.3

1

μm

typ.

Min. incremental
motion Z

0.2

0.5

0.2

0.5

μm

typ.

Minimum incremental
motion θX, θY, θZ

3; 3; 5

7.5; 7.5; 15

3; 3; 5

7.5; 7.5; 15

μrad

typ.

Backlash in X, Y

4

6

4

6

μm

typ.

Backlash in Z

0.5

1.5

0.5

1.5

μm

typ.

Backlash in θX, θY

7.5

25

7.5

25

μrad

typ.

Backlash in θZ

60

90

60

90

μrad

typ.

Repeatability X, Y

±0.6

±0.5

±0.5

±0.5

μm

typ.

Repeatability in Z

±0.2

±0.2

±0.2

±0.2

μm

typ.

Repeatability in θX, θY

±3

±0.3

±3

±3

μrad

typ.

Repeatability in θZ

±9

±7.5

±9

±7.5

μrad

typ.

Max. velocity in X, Y, Z

0.5

8

0.5 / 0.15

8 / 2.5mm/s

Max. velocity in θX, θY, θZ

6120

6 / 1.8

120 / 30

mrad/sTyp. Velocity in X, Y, Z

0.3

5

0.3 / 0.1

5/2

mm/s

Typ. Velocity in θX, θY, θZ

375

3 / 1.2

75 / 25

mrad/sN/μm

Precision Positioning
Hexapods

mm

Mechanical properties
Stiffness X, Y

7

7

7

7

Stiffness Z

100

100

100

100

N/μm

Load capacity,horizontal base plate

250

50

250 / 80

50 / 25kg

max.

Load capacity, baseplate in any orientation

50

20

50 / 40

20 / 10kg

max.

Holding force, power
off, horizontal base plate

2000

250

2000

250

N

max.

Holding force, power
off, base plate in any
orientation

500

85

500

85

N

max.

Motor type

BLDC gear motor

BLDC gear motor

DC gear motor

DC gear motor

Operating temperaturerange–10 to 50–10 to 50-–10 to 50-–10 to 50

Material

Aluminum

Aluminum

Aluminum

Aluminum

Mass

17

17

17

17

kg

±10 %

Cable length33

3 / 3 (air) + 2(vacuum)

3 / 3 (air) + 2(vacuum)m±10 mmMiscellaneous°C

Technical data specified at 20±3 °C.
* The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent.
The data for each axis in this table shows its maximum travel range, where all other axes and the pivot point are at the reference position.
** For continuous operation in a vacuum, restrictions on operating parameters may be necessary due to heat generation.
Ask about customized versions.

57

MOTION|POSITIONINGH-850.x2A, dimensions in mm

58

W W W. P I . W S

H-850.x2 and H-850.x2V, dimensions in mm

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Precision Positioning
Hexapods



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 *59

MOTION|POSITIONING

H-840 6-Axis Hexapod
Inexpensive, Precise, and Fast

H-840.x2A / x2I, dimensions in mm–■

Load capacity to 30 kg■

Travel ranges to ±50 mm / ±30°■

Repeatability to ±0.1 μm■

Velocity to 60 mm/s■

BLDC motors and variants with absolute encoders■

Works in any orientation

Applications■ Optics alignment■ Micro assembly■ Sample positioning>> Absolute Encoder■ Motion simulation for optical image>> Parallel Kinematics, Hexapods

stabilization (OIS)■ Precise robotics

Technology Glossary ...................... page 124

60

W W W. P I . W S

H-840.G2A

H-840.D2A

H-840.G2I

H-840.D2I

For high duty
cycles, high load
capacity andholding force, nohoming required

For high duty
cycles, fastermotion, no homing required

For high duty
cycles, high load
capacity andholding force

For high duty
cycles, fastermotionBLDC gear
motor withabsolute
encoder

BLDC motorwith absolute
encoder

BLDC gear
motor withrotary encoder

BLDC motorwith rotary
encoder

Unit

Tolerance

Precision Positioning
Hexapods

Motion and positioning

Active axes

X, Y, Z, θX, θY, θZ

X, Y, Z, θX, θY, θZ

X, Y, Z, θX, θY, θZ

X, Y, Z, θX, θY, θZ

Travel range* X, Y

±50

±50

±50

±50

Travel range* Z

±25

±25

±25

±25

mm

Travel range* θX, θY

±15

±15

±15

±15

°

Travel range* θZ

±30

±30

±30

±30

°

Actuator design
resolution

0.0085

0.25

0.005

0.037

μm

Min. incremental
motion X, Y

0.3

2.5

0.25

0.5

μm

typ.

Min. incremental
motion Z

0.2

1

0.15

0.25

μm

typ.

Minimum incremental
motion θX, θY, θZ

3; 3; 5

15; 15; 40

4; 4; 6

4.5; 4.5; 8.5

μrad

typ.

Backlash in X, Y

1

0.5

1

0.5

μm

typ.

Backlash in Z

0.3

0.5

0.3

0.5

μm

typ.

Backlash in θX, θY

5

8

5

8

μrad

typ.

Backlash in θZ

10

5

10

5

μrad

typ.

Repeatability X, Y

±0.3

±0.4

±0.3

±0.4

μm

typ.

Repeatability in Z

±0.15

±0.1

±0.15

±0.1

μm

typ.

Repeatability in θX, θY

±2.5

±1.5

±2.5

±1.5

μrad

typ.

Repeatability in θZ

±3

±4

±3

±4

μrad

typ.

Max. velocity in X, Y, Z

2.5

60

2.5

60

mm/s

mm

Max. velocity in θX, θY, θZ

30

700

30

700

mrad/sTyp. Velocity in X, Y, Z

2

40

2

40

mm/s

Typ. Velocity in θX, θY, θZ

25

480

25

480

mrad/sLoad capacity(horizontal base plate /any orientation)

30 / 1010 / 330 / 1010 / 3kg

max.

Holding force, power off(horizontal base plate /any orientation)

100 / 25

15 / 5100 / 25

15 / 5N

max.

Operating temperaturerange–10 to 50–10 to 50–10 to 50–w10 to 50°C

Material

Aluminum / steel

Aluminum / steel

Aluminum / steel

Aluminum / steel

Mass

12

12

12

12

kg

±10 %

Cable length

3

3

3

3

m

±10 mmMechanical properties

MiscellaneousTechnical data specified at 20±3 °C.
Specifications for vacuum versions can differ.
* The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent.
The data for each axis in this table shows its maximum travel range, where all other axes and the pivot point are at the reference position.
Ask about customized versions.

61

MOTION|POSITIONING

H-840 6-Axis Hexapod
Inexpensive, Precise, and Fast

H-840.x2, dimensions in mm■

Load capacity to 30 kg■

Travel ranges to ±50 mm / ±30°■

Repeatability to ±0.1 μm■

Velocity to 50 mm/s■

Works in any orientation

Applications■ Optics alignment■ Micro assembly■ Sample positioning>> Parallel Kinematics, Hexapods■ Motion simulation for optical image

stabilization (OIS)■ Precise robotics

Technology Glossary ...................... page 124

62

W W W. P I . W S

H-840.G2

H-840.D2

For high precision,high load and holding force

For faster motion

Unit

Tolerance

Active axes

DC gear motor

DC motor

X, Y, Z, θX, θY, θZ

X, Y, Z, θX, θY, θZ

Travel range* X, Y

±50

±50

mm

Travel range* Z

±25

±25

mm

Precision Positioning
Hexapods

Motion and positioning

Travel range* θX, θY

±15

±15

°

Travel range* θZ

±30

±30

°

Actuator design resolution

0.017

0.5

μm

Min. incremental motion X, Y

0.3

5

μm

typ.

Min. incremental motion Z

0.2

3

μm

typ.

Minimum incremental motion θX, θY, θZ

3; 3; 545; 45; 85

μrad

typ.

Backlash in X, Y

1

1

μm

typ.

Backlash in Z

0.3

0.4

μm

typ.

Backlash in θX, θY

5

6

μrad

typ.

Backlash in θZ

10

10

μrad

typ.

Repeatability X, Y

±0.3

±1

μm

typ.

Repeatability in Z

±0.15

±0.1

μm

typ.

Repeatability in θX, θY

±2.5

±1.5

μrad

typ.

Repeatability in θZ

±3

±10

μrad

typ.

Max. velocity in X, Y, Z

2.5

50

mm/s

Max. velocity in θX, θY, θZ

30

600

mrad/sTyp. velocity in X, Y, Z

2

30

mm/s

Typ. velocity in θX, θY, θZ

25

360

mrad/sLoad capacity (horizontal base plate /any orientation)

30 / 1010 / 3kg

max.

Holding force, power off (horizontal
base plate / any orientation)

100 / 25

15 / 5

N

max.

°C

Mechanical properties

Miscellaneous
Operating temperature range–10 to 50–10 to 50

Material

Aluminum / steel

Aluminum / steel

Mass

12

12

kg

±10 %

Cable length

3

3

m

±10 mmTechnical data specified at 20±3 °C.
Specifications for vacuum versions can differ.
* The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent.
The data for each axis in this table shows its maximum travel range, where all other axes and the pivot point are at the reference position.
Ask about customized versions.

63

MOTION|POSITIONINGH-820 6-Axis Hexapod
Inexpensive Hexapod

H-820.D2, dimensions in mm

Applications■

Six degrees of freedom, travel ranges
to 100 mm / 60°■

Load capacity to 20 kg■

Velocity under full load to 20 mm/s■

Repeatability up to ±0.5 μm■

Brushless DC motors (BLDC)■

Works in any orientation■

Fast response behavior>> Parallel Kinematics, Hexapods■ Micro machining■ Automation

Technology Glossary ...................... page 124

64

W W W. P I . W S

H-820.D2

Unit

Tolerance

Motion and positioning
Active axes

X, Y, Z, θX, θY, θZ

Travel range* X, Y

±50

Travel range* Z

±25

mm

Travel range* θX, θY±15°

Travel range* θZ±30°Actuator drive

Torque motor, brushless (BLDC)

Actuator design resolution

0.2

μm

Minimum incremental motion X, Y, Z

5

μm

typ.

Minimum incremental motion θX, θY, θZ

12.5

μrad

typ.

Precision Positioning
Hexapodsmm

typ.

Repeatability X, Y

±1.5

μm

typ.

Repeatability Z

±0.5

μm

typ.

Repeatability θX, θY

±8

μrad

typ.

Repeatability θZ

±25

μrad

typ.

Backlash X, Y

30

μm

typ.

Backlash Z

3

μm

typ.

Backlash θX, θY

30

μrad

typ.

Backlash θZ

300

μrad

typ.

Max. velocity X, Y, Z

20

mm/s

Max. velocity θX, θY, θZ

200

mrad/sLoad capacity (horizontal base plate)

20

kg

max.

Load capacity (base plate in any
orientation)

10

kg

max.

Holding force (horizontal base plate)

200

N

max.

Holding force (base plate in any
orientation)

100

N

max.

Operating temperature range

0 to +50°C

Material

Aluminum

Mechanical properties

Miscellaneous

Mass

15

kg

±5 %

Cable length

3m±10 mmRecommended controller

C-887.5x

Technical data specified at 20±3 °C.
* The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent. The data for each axis
in this table shows its maximum travel range, where all other axes and the pivot point are at the reference position.
Ask about customized versions.

65

MOTION|POSITIONING

H-845 Heavy-Duty Hexapod
Position up to 1 Ton with Micrometer Precision■

Load capacity to 1000 kg■

Velocity to 50 mm/s■

Repeatability to ±0.5 μm■

Travel ranges to 340 mm / 60°■

Scalable design: Dimensions, travel ranges,
and loads■

Drive: brushless motors with brake■

High-performance digital controller andsoftware included

Product Overview
Parallel-kinematic design for six degrees of freedom making it significantly
more compact and stiff than serial-kinematic systems, higher dynamic range,
no moved cables: Higher reliability, reduced friction. Large aperture. Brushless
DC motors with brake.
Rapid implementation of customer requests
The high-load hexapod has a modular structure and uses a set of different modules
for drive units and joints. The platforms can be adapted to the customer’s application. This allows for rapid implementation of special customer requirements.
High-performance digital controller, open software architecture
6-DOF controller for hexapods, including two additional servo axes. Freely programmable stable pivot point. Positions commanded in Cartesian coordinates.
Macro programming. Open-source NI LabVIEW driver and libraries. Workspace
simulation. Virtual machine for hexapod emulation. Optional: Software foravoiding collisions in restricted workspace.

Applications>> Extensive Software Package■ Robotic part handling>> Parallel Kinematics, Hexapods■ Satellite testing■ Precision assemblyTechnology Glossary ...................... page 124

66

W W W. P I . W S

Active axes

H-845.D11

H-845.D31

H-845.D51

H-845.D21

H-845.D41

H-845.D61

For maxload andholding
force, highprecision,
small

Combines
high dynamics andhigh load
capacity,small

For best
dynamics,
small

For max.
load andholding
force, highprecision,large

Combines
high dynamics andhigh load
capacity,large

For best
dynamics,
large

X, Y, Z,
θX, θY, θZ

X, Y, Z,
θX, θY, θZ

X, Y, Z,
θX, θY, θZ

X, Y, Z,
θX, θY, θZ

X, Y, Z,
θX, θY, θZ

X, Y, Z,
θX, θY, θZ

Unit

Tolerance

Travel range* X, Y

±110

±110

±110

±170

±170

±170

mm

Travel range* Z

±50

±50

±50

±105

±105

±105

mm

Travel range* θX, θY

±15

±15

±15

±20

±20

±20

°

Travel range* θZ

±30

±30

±30

±30

±30

±30

°

Actuator design
resolution

0.04

0.08

0.1

0.04

0.08

0.1

μm

Min. incremental
motion X, Y

1

2

2.5

1

2

2.5

μm

typ.

Min. incremental
motion Z

0.5

1

1

0.5

1

1

μm

typ.

Minimumincremental motion
θX, θY, θZ

15

30

30

15

30

30

μrad

typ.

Backlash X, Y

5

10

10

5

10

10

μm

typ.

Backlash Z

1

2

2

1

2

2

μm

typ.

Backlash θX, θY

15

30

30

15

30

30

μrad

typ.

Backlash θZ

30

60

60

30

60

60

μrad

typ.

Repeatability X, Y

±2

±4

±5

±2

±4

±5

μm

typ.

Repeatability Z

±0.5

±1

±2

±0.5

±1

±2

μm

typ.

Repeatability
θX, θY, θZ

±10

±20

±25

±10

±20

±25

μrad

typ.

Max. velocity X, Y, Z

20

40

50

20

40

50

mm/s

Max. velocity
θX, θY, θZ

50

100

120

50

100

120

mrad/sTyp. velocity X, Y, Z

10

20

25

10

20

25

mm/s

Typ. velocity
θX, θY, θZ

20

40

50

20

40

50

mrad/sLoad capacity (baseplate horizontal /any orientation)

1000 / 300

500 / 150

400 / 120

1000 / 300

500 / 150

400 / 120kg

Motor type

BLDC
motor

BLDC
motor

BLDC
motor

BLDC
motor

BLDC
motor

BLDC
motor

Operatingtemperature range–10 to 50–10 to 50–10 to 50–10 to 50–10 to 50–10 to 50

Material

Aluminum

Aluminum

Aluminum

Aluminum

Aluminum

Aluminum

Mass

120

120

120

150

150

150

kg

±5 %

Cable length

9

9

9

9

9

9

m

±10 mm

C-887

C-887

C-887

C-887

C-887

C-887

Precision Positioning
Hexapods

Motion andpositioning

Mechanicalproperties
max.

Miscellaneous°C

Controller
Included in thescope of scope ofdeliveryTechnical data specified at 20±3 °C.
* The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent. The data for each axis
in this table shows its maximum travel range, where all other axes and the pivot point are at the reference position.
Ask about customized versions.

67

MOTION|POSITIONING

H-845.D11, H-845.D31, and H-845 .D51, dimensions in mm

68

W W W. P I . W S

Precision Positioning
Hexapods

H-845.D21, H-845.D41, and H-845.D61, dimensions in mm

69

MOTION|POSITIONING

Dynamic Motion Hexapods

70

W W W. P I . W S

72

H-811.S2 6-Axis Motion Hexapod ..................................................................................
H-840 6-Axis Hexapod ...................................................................................................
H-860 6-Axis Motion Hexapod .......................................................................................

72
60
76

Dynamic Motion
Hexapods

Dynamic Motion Hexapods ......................................................................................................................................................

71

MOTION|POSITIONINGH-811.S2 6-Axis Motion Hexapod
Fast and Compact for High Dynamics Applications■

CIPA certified■

Travel ranges to ±17 mm / ±21°■

Velocity to 25 mm/s■

Dynamics to 25 Hz over 0.1° travel range■

Brushless DC motors (BLDC)■

Developed for image stabilization inspection
systems

Reference-class 6-axis positioning system
Parallel-kinematic design for six degrees of freedom making it significantly
more compact and stiff than serial-kinematic systems, higher dynamic range,
no moved cables: Higher reliability, reduced friction. Vacuum-compatible version to 10–6 hPa available.
Direct drive with brushless DC motors (BLDC) and long-life ball screws
High precision, velocity and lifetime.

Applications>> Parallel Kinematics, Hexapods■ Motion simulation for opticalimage stabilization (OIS)Technology Glossary ...................... page 124

72

W W W. P I . W S

H-811.S2

Unit

Tolerance

Motion and positioning
X, Y, Z, θX, θY, θZ

Travel range* X, Y, Z

±17, ±16, ±6.5mm

Travel range* θX, θY, θZ±10, ±10, ±21°

Actuator design resolution

5

nmMin. incremental motion X, Y

1μm

Min. incremental motion Z

0.5

μm

typ.

Minimum incremental motion θX, θY, θZ

12

μrad

typ.

typ.

Minimum incremental motion θZ

25

μrad

typ.

Backlash X, Y

0.5

μm

typ.

Backlash Z

0.15

μm

typ.

Backlash θx, θy

5

μrad

typ.

Backlash θZ

10

μrad

typ.

Repeatability X, Y

±0.5

μm

typ.

Repeatability Z

±0.2

μm

typ.

Repeatability θx, θy

±6

μrad

typ.

Repeatability θZ

±10

μrad

typ.

Max. velocity X, Y, Z

25

mm/s

Max. velocity θX, θY, θZ

625

mrad/sTyp. Velocity X, Y, Z

10

mm/s

Typ. Velocity θX, θY, θZ

240

mrad/sStiffness X, Y

0.7

N/μm

Stiffness Z

8

N/μm

Load capacity (horizontal base plate /any orientation)

1.5 / 0.3

kg

max.

Holding force, power off (horizontal
base plate / any orientation)

15 / 2.5N

max.

Motor type

Brushless DC motor

Dynamic Motion
Hexapods

Active axes

Mechanical properties

Miscellaneous
Operating temperature range

0 to 50

Material

Stainless steel, aluminum

°C

Mass

2.2

kg

±5 %

Cable length2m±10 mmRecommended controller

C-887.5x

Technical data specified at 20±3 °C.
* The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent. The data for each axis in thistable shows its maximum travel range, where all other axes and the pivot point are at the reference position.
Ask about customized versions.

H-811 is certified by the CIPA for use
in image stabilization systems

73

MOTION|POSITIONINGH-811.S2, dimensions in mm

74

W W W. P I . W S

75

MOTION|POSITIONING
Dynamic Motion
Hexapods

H-860 6-Axis Motion Hexapod
Magnetic Direct Drive for High Velocity■

High velocity and dynamics■

Low moving intrinsic mass■

Velocity up to 250 mm/s■

Precise path tracking■

Friction-free voice coil drive

Reference-class 6-axis positioning system
Parallel-kinematic design for six degrees of freedom making it significantly
more compact and stiffer than serial-kinematic systems, no moved cables. Precise running of predefined motion profiles with high path accuracy: Sine curves
and freely definable trajectories.
PIMag® Voice coil
Voice coil drives consist of 2 essential components: A permanent magnet and acoil, which are located in the air gap of the magnetic field. Thanks to their low
weight and friction-free drive principle, voice coil drives are particularly suitable
for applications that require high dynamics and high velocities at limited travel
ranges. High scan frequencies and precision positioning are also possible withthese drives, because they are free of the effects of hysteresis.

Applications>> Flexures■ Motion simulation for optical>> Parallel Kinematics, Hexapods

image stabilization (OIS)>> PIMag® Voice Coil■ Testing of automotive LIDAR

systems
Technology Glossary ...................... page 124

76

W W W. P I . W S

H-860.S2H

Unit

Tolerance

Motion and positioning
X, Y, Z, θX, θY, θZ

Travel range* in X, Y, Z

±7.5

mm

Travel range* in θX, θY, θZ±4°Actuator design resolution

5

nm

Minimum incremental motion in X, Y

1

μm

typ.

Minimum incremental motion in Z

1

μm

typ.

Minimum incremental motion in θX, θY, θZ

9

μrad

typ.

Backlash in X, Y

0.2

μm

typ.

Backlash in Z

0.06

μm

typ.

Backlash in θX, θY

4

μrad

typ.

Backlash in θZ

4

μrad

typ.

Unidirectional repeatability in X, Y

±0.5

μm

typ.

Unidirectional repeatability in Z

±0.5

μm

typ.

Unidirectional repeatability in θX, θY

±9

μrad

typ.

Unidirectional repeatability in θZ

±9

μrad

typ.

Velocity in X, Y, Z

250

mm/s

max.

Max. frequency

30

Hz

Amplitude-frequency product in X, Y, Z

30

mm·Hz

Amplitude-frequency product in θX, θY, θZ

15

°·Hz

Amplitude error

10

%

max.

Phase error

60

°

max.

Stiffness in X, Y

0.7

N/μm

Stiffness in Z

8

N/μm

Load capacity (horizontal base plate /any orientation)

1kg

Motor type

Voice CoilDynamic Motion
Hexapods

Active axes

Mechanical properties

max.

Miscellaneous
Operating temperature range

0 to 50

Material

Stainless steel, aluminum

°C

Mass

30

Recommended controller

C-887.5xkg±5 %Technical data specified at 20±3 °C.
* The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent. The data for each axis in thistable shows its maximum travel range, where all other axes and the pivot point are at the reference position.
Ask about customized versions.

77

MOTION|POSITIONINGH-860.S2H, dimensions in mm

78

W W W. P I . W S

Dynamic Motion
Hexapods

Sinusoidal oscillation with 30 Hz in θX.
The H-860 follows the specified trajectory
precisely.

Sinusoidal oscillation with 30 Hz in Z.
The H-860 follows the specified trajectory
precisely.

Sinusoidal oscillation with 30 Hz in Z, amplitude 0.5 mm. Due to the high dynamics andmass being moved, the H-860 can simulate
accelerations precisely. The acceleration wasmeasured in Z direction with an external
acceleration sensor directly at the motion
platform.

79

MOTION|POSITIONINGFast Multi-Channel
Photonics Alignment Systems

80

W W W. P I . W S

82

Automated Alignment is the Key to High Throughput and Outstanding Quality ...........
Basics of PI’s Unique Fast Multi-Channel Photonic Alignment (FMPA) .........................
First Light Scan ..............................................................................................................
Area Scan Routines .......................................................................................................
Gradient Search Routines ..............................................................................................
PIMikroMove .................................................................................................................
Available Programming Languages ..............................................................................

82
83
84
85
85
86
87

Solutions ..................................................................................................................................................................................

88

F-712.HU1 Fast Multi-Channel Photonics Alignment System ........................................
F-712.HA1 High-Precision Single-Sided Fiber Alignment System .................................
F-712.HA2 High-Precision Double-Sided Fiber Alignment System ................................
F-712.MA1 High-Precision Single-Sided Fiber Alignment System .................................
F-712.MA2 High-Precision Double-Sided Fiber Alignment System ...............................
F-712.PM1 Optical Power Meter ....................................................................................

88
92
94
98
100
104

Fast Multi-Channel Photonics
Alignment Systems

Introduction .............................................................................................................................................................................

81

MOTION|POSITIONING

Automated Alignment is
the Key to High Throughput
and Outstanding Quality
The key component of the alignment systems is PI’s NanonoCube®, a highly dynamic, closed-loop XYZ piezo scanner.
er.
It is so compact yet yields 100 x 100 x 100 μm travel withithnanoscale repeatability and extreme speed. With a completely
ely
wear-free working principle, it makes even the most compliplicated coupling optimizations possible in typically a few
ew
hundred milliseconds. The integrated optical encoder offers
ers
the highest bandwidth and resolution for this high-dynamic
mic
application. Closed-loop operation helps ensure devicecesafety and process repeatability.

PI hexapods offer all 6 degrees of freedom, namely 3 linear
and 3 rotational axes, combined into parallel kinematics. A
further advantage of the hexapod is the user-definable pivot
point that enables rotation directly around the fiber tip and
if required, also allows any other point of rotation.

Either stacked linear axes or hexapods can be used for
positioning or scanning larger areas. In the case of stacked
systems, a lot of value was placed on robustness and stiffness. All linear axes are equipped with position sensors andare connected to each other by very stiff brackets. Highquality components and a solid design guarantee reliability
and a long lifetime.

82

W W W. P I . W S

Basics of PI’s Unique Fast Multi-Channel
Photonic Alignment (FMPA)
Comprehensive Software Stack Enables Easy Integration and Use
PIMikroMove supports the user in setting up and parametrizing theoverall system. For the execution of motion commands and additional optimizations, no additional programming effort is necessary. Intuitively operable user interfaces, comprehensive online help
pages, graphic visualizations, and simple automation possibilities
support a quick introduction and trouble-free usage.
Programming interfaces allow the user to integrate a PI controller
into their own user programs. The control of the positioning system
therefore becomes part of the user program. Interfaces are available for all common programming languages including NI LabVIEW
and MATLAB.

The F-712 FMPA systems include all necessary electronics to perform positioning and therefore automatic alignment. Because the demand on thecomputing power required for the complex algorithms with clock rates in
the kilohertz range is very high, only high-performance controllers from
PI are used. In addition, each controller has several high-resolution analog
inputs with high bandwidth for supporting these dynamic applications.
Typically, alignment systems with hexapod include the C-887.521 hexapod
controller. For stacked systems, and to control the NanoCube®, a variant
from the very flexible and modular E-712 controller series is used. This
controller offers the highest computing performance and is therefore able
to perform several scan algorithms for several axes simultaneously. Thatmeans that the controller not only calculates and commands the axes inreal time but also records the corresponding position and analog values
at the same time. Evaluation is even done within the servo cycle during
a gradient search in order to control the motion of the axes according to
the gradients found.

Groundbreaking Built-in-Routines for fastest Peak Finding
Built-in routines enable extremely high alignment speed. The
algorithms for first light, area scan, and gradient search routines
are extraordinarily fast and reliable for all kind of couplings.
They offer process time of less than 1 second for aligning input
and output simultaneously. PI algorithms even include automatic modeling of scan data to accurately localize the optimum evenin fast, coarse scans. This includes the ability to rapidly localize
the centroid of top-hat couplings – another PI world exclusive.

83

MOTION|POSITIONING

Fast Multi-Channel Photonics
Alignment Systems

High-End Controllers for the Highest Demands

First Light Scan

In order to determine the global maximum of a signal, it
is necessary to make an intensity signal available to thecontroller that can be optimized. The built-in firmware
algorithms provide all convenient and fast searching for‘first light’. To ensure extremely fast success for firstlight searching, it is possible to combine several areascan routines for this scan, which can be performed
simultaneously.
This can be performed quickly and reliably even for doublesided tasks, where both sides need to be coupled at
the same time; the firmware-based algorithms run fully
automatically and simultaneously until the predefined
threshold value has been reached or the entire area has
been scanned.

All axes, irrespective of whether they are coarse or fine axes, can be used and configured according to their dynamics. For example,
the transmitter side can perform highly dynamic area scans, during which, the receiver side moves slowly but continuously. Therefore,
the entire transmitter side is scanned for each and every position on the receiver side. It is also possible to set whether scanningstops as soon as the defined threshold value has been reached or whether the entire area of both sides should be examined.

84

W W W. P I . W S

Area Scan Routines

The FMPA system offers 3 different routines for an area scan. The
spiral scan with constant angular velocity, the spiral scan with constant path velocity, and the sinusoidal area scan. All routines can be
configured individually and therefore optimized for the respective
application case. Several scan routines can also be started simultaneously with a single command. It is possible to calculate theapproximate maximum using a Gauss function or by determining
the centroid.
In the case of the sinusoidal scan routine the defined surface isscanned continuously without strong acceleration or deceleration
phases. Surface, starting point, line distance, and success criteria
can be defined by the user.

Fast Multi-Channel Photonics
Alignment Systems

In the case of the spiral scan routine, a defined area is scanned
helically, whereby either a constant angle or a constant path velocity is maintained. The advantage of spiral scanning at a constantfrequency is the ability to avoid system resonance. This ensures
successful scanning. The advantage of spiral scanning at a constantpath velocity is the ability to reduce the scanning duration in thecase of lower system dynamics. Application-specific configurationof the routine is also possible here.

Gradient Search Routines
Ground-breaking results can be achieved with the unique implementation of this algorithm. If the light signal
is present, this gradient search makes it possible to find the signal maximum in less than 1 second even in thecase of double-sided tasks. It is also possible to run several searches at the same time and therefore optimize thesignal simultaneously in several degrees of freedom. The routine allows excellent “tracking” and therefore it ispossible to compensate any drift effects.
ffects. Several parameters are also available here for optimizing the search
for the respective application case..

85

MOTION|POSITIONINGPIMikroMove

PIMikroMove gives you the option to control axes, perform (manual)tuning as well as record data from the controller in real time, display
the data graphically and also analyze the data. Furthermore, it is also
possible to access all controller algorithms and parametrize them conveniently; this also includes the fast alignment routines.
A live display of the analog inputs (incl. floating chart) as well as a 3-Dview of optical distribution of the scanned area is particularly interesting
for alignment tasks. Of course, it is also possible to export the data(.csv). Various tools are available for realtime data analysis, triggering,
configuration, and much more.

PIMikroMove does not only offer the possibility ofanalyzing the dynamic properties of the PI axes, but
can even perform an evaluation of the overall systemwith the help of an FFT analysis of the optical signal.

86

W W W. P I . W S

Available Programming Languages

Fast Multi-Channel Photonics
Alignment Systems

Ready-to-use NI LabVIEW sample application that provides
fast access to controller-based alignment routines as well
as visualization and system analysis.

User-friendly, platform-independent application
development libraries and sample applications foreasy, fast, and flexible implementation■

Libraries for C++, C#, VB.net, etc.

■

Python■NI LabVIEW■

MatLab

Available for Windows, Linux and OS X deployment.
Universal Command Set (GCS) simplifies commissioning and programming. Supports PI controllers’built-in, ultrafast, and vibration-free scan/alignalgorithms. It is also possible to access the entire
command set, including the fast alignment routines
in the controller, in order to parameterize and execute them. This makes it possible for customers
to integrate PI controllers into their own software
solutions quickly and easily.

87

MOTION|POSITIONING

F-712.HU1 Fast Multi-Channel
Photonics Alignment System
System with 6 Degrees of Freedom for Aligning Fibers and Optical Components■

Integrated scan routines for fiber opticalignment■

Ideal for applications in silicon photonics■

Extensive software package■

Position sensors for high accuracy andoperational reliability■

Automatic alignment of several fibers
in <0.2 s■

Freely selectable virtual pivot point■

High-resolution analog input

Fast and high-precision drives
The basis of the fiber alignment system is a very stiff setup with an H-811 hexapod and a P-616 NanoCube® nanopositioner. The parallel-kinematic design formotion in six degrees of freedom ensures high system stiffness. The motorized
drives make long travel ranges possible and at the same time, the NanoCube®
nanopositioner allows fast scanning motion and dynamic compensation of drift
effects. Flexure guides and all-ceramic PICMA® actuators guarantee a long lifetime. Because all drives are equipped with position sensors, the system works
precisely and reliably with high repeatability.

Applications■ Alignment of Optical Components■ Silicon Photonics Alignment>> Extensive software package■ Wafer Probing of Photonic

Integrated Circuits>> Flexures>> Parallel Kinematics, Hexapods>> PICMA® Multilayer piezo actuators■ Testing and packaging of Photonic

Integrated Circuits
Technology Glossary ...................... page 124

88

W W W. P I . W S

F-712.HU1

Unit

Motion and positioning
Number of active axes

9

Rough positioning
Active axes

X, Y, Z, θX, θY, θZ

Travel range in X, Y, Z

±17, ±16, ±6.5*mm

Travel range in θX, θY, θZ±10, ±10, ±21*°

Minimum incremental motion in X, Y

0.1

μm

Minimum incremental motion in Z

0.05

μm

Max. velocity

20

mm/s

Sensor type

Incremental rotary encoder

Drive type

Brushless DC motor

Fine positioning
X, Y, Z

Travel range in X, Y, Z, closed loop

100

μm

Min. incremental motion, open-loop

0.3

nm

Min. incremental motion, closed-loop

2.5

nm

Linearity error, for the entire travel range**2%

Repeatability (bidirectional) 10 %travel range

2

nm

Sensor type

Incremental linear encoder

Drive type

PICMA®
Fast Multi-Channel Photonics
Alignment Systems

Active axes

Alignment
Scanning time of spiraled areascan 500 μm Ø***<2sScanning time of spiraled area scan
100 μm Ø***

<0.3

s

Scanning time of spiraled area scan
10 μm Ø***

<0.2

s

Scanning time, gradient scan, randomized
with ±5 μm (repeatability <0.01 dB)****

<0.3

s

Operating temperature range, mechanics

0 to 50°C

Operating temperature range, controller

5 to 40°C

Cable length2m

MiscellaneousTechnical data specified at 20±3 °C.
*
The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent.
The data for each axis in this table shows its maximum travel range, where all other axes and the pivot point are at the reference position.
See the dimensional drawings for the default coordinate system and pivot point coordinates of the hexapod. Changing the pivot point
will reduce the travel range in θX, θY, θZ. Changing the orientation of the coordinate system (e.g., when the optical axis is to be the Z axis),
will change the travel range in X, Y, and Z.
** without polynomial linearization*** typical time span for scanning the entire area and moving to the highest intensity**** reaching the global maximum after first light has been foundAsk about customized versions.

Requirements for the
optical power meter

Unit

Output signal

Analog output, ideally converted
from linear to logarithmic

Output voltage range, max.

–5 to 5

Bandwidth, min.

1

kHz

Noise level, max.

–60

dBm

V

89

MOTION|POSITIONING

F-712.HU1, dimensions in mm

90

W W W. P I . W S

91

MOTION|POSITIONING
Fast Multi-Channel Photonics
Alignment Systems

F-712.HA1 High-Precision
Single-Sided Fiber Alignment System
System with 6 Degrees of Freedom for Aligning Fibers and Optical Components

F-712.HA1, dimensions in mm■

Integrated scan routines for fiber optic alignment■

Ideal for applications in silicon photonics■

Extensive software package■

Direct detection of the optical signal, high-resolution
analog input■

Position sensors for high accuracy and operational reliability■

Automatic alignment of several fibers in <0.2 s

Applications■ Alignment of Optical Components■ Silicon Photonics Alignment>> Extensive software package■ Wafer Probing of Photonic

Integrated Circuits>> Flexures>> Parallel Kinematics, Hexapods>> PICMA® Multilayer piezo actuators■ Testing and packaging of Photonic

Integrated Circuits
Technology Glossary ...................... page 124

92

W W W. P I . W S

F-712.HA1

Unit

Motion and positioning
Number of active axes

9

Rough positioning
Active axes

X, Y, Z, θX, θY, θZ

Travel range in X, Y, Z

±6.5, ±16, ±8.5*mm

Travel range in θX, θY, θZ±14.5, ±10, ±10*°

Minimum incremental motion

0.1

μm

Max. velocity

10

mm/s

Sensor type

Rotary encoder

Guide

–

Drive type

Brushless DC motor

Fine positioning
X, Y, Z

Travel range in X, Y, Z, closed loop

100

μm

Min. incremental motion, open-loop

0.3

nm

Min. incremental motion, closed-loop

2.5

nm

Linearity error, for the entire travel range**2%

Repeatability (bidirectional)
10 % travel range

2

nm

Sensor type

Incremental

Drive type

PICMA®
Fast Multi-Channel Photonics
Alignment Systems

Active axes

Alignment
Scanning time of spiraled area scan
500 μm Ø***<2sScanning time of spiraled area scan
100 μm Ø***

<0.3

s

Scanning time of spiraled area scan
10 μm Ø***

<0.2

s

Scanning time, gradient scan, randomized
with ±5 μm (repeatability <0.01 dB)****

<0.3

s

Operating temperature range, mechanics

0 to 50°C

Operating temperature range, controller

5 to 40°C

Cable length2m

MiscellaneousTechnical data specified at 20±3 °C.
*
The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent.
The data for each axis in this table shows its maximum travel range, where all other axes and the pivot point are at the reference position.
See the dimensional drawings for the default coordinate system and pivot point coordinates of the hexapod. Changing the pivot point will reduce the travel
range in θX, θY, θZ. Changing the orientation of the coordinate system (e.g., when the optical axis is to be the Z axis), will change the travel range in X, Y, and Z.
** without polynomial linearization*** typical time span for scanning the entire area and moving to the highest intensity**** reaching the global maximum after first light has been foundAsk about customized versions.

Requirements for the
optical power meter

Unit

Output signal

Analog output, ideally converted
from linear to logarithmic

Output voltage range, max.

–5 to 5

Bandwidth, min.

1

kHz

Noise level, max.

–60

dBm

V

93

MOTION|POSITIONING

F-712.HA2 High-Precision
Double-Sided Fiber Alignment System
System with 6 Degrees of Freedom for Aligning Fibers and Optical Components

Double-sided fiber alignment system.
Actual model may differ.

■

Integrated scan routines for fiber optic alignment■

Ideal for applications in silicon photonics■

Extensive software package■

Direct dDidetectioni
off theh optical
i l signal,il high-resolution
hi hl i analog
l inputi■

Position sensors for high accuracy and operational reliability■

Automatic alignment of several fibers in <0.5 s■

Simultaneous alignment of the transmitter and receiver

Fast and high-precision drives
The basis of the fiber alignment system is a very stiff setup with an H-811 hexapod and a P-616 NanoCube® nanopositioner. The parallel-kinematic design formotion in degrees of freedom ensures high system stiffness. The motorized
drives make longer travel ranges possible and at the same time, the NanoCube®
nanopositioner ensures fast scanning motion and dynamic compensation ofdrift effects. Flexure guides and all-ceramic insulated PICMA® actuators guarantee a long lifetime. Because all drives are equipped with position sensors,
it is possible for example, to reliably prevent collisions with expensive siliconwafers.

Applications■ Alignment of Optical Components■ Silicon Photonics Alignment>> Extensive software package■ Wafer Probing of Photonic

Integrated Circuits>> Flexures>> Parallel Kinematics, Hexapods>> PICMA® Multilayer piezo actuators■ Testing and packaging of Photonic

Integrated Circuits
Technology Glossary ...................... page 124

94

W W W. P I . W S

F-712.HA2

Unit

Motion and positioning
Number of active axes

18

Rough positioning
Active axes

X, Y, Z, θX, θY, θZ

Travel range in X, Y, Z

±6.5, ±16, ±8.5*mm

Travel range in θX, θY, θZ±14.5, ±10, ±10*°

Minimum incremental motion

0.1

μm

Max. velocity

10

mm/s

Sensor type

Rotary encoder

Guide

–

Drive type

Brushless DC motor

Fine positioning
X, Y, Z

Travel range in X, Y, Z, closed loop

100

μm

Min. incremental motion, open-loop

0.3

nm

Min. incremental motion, closed-loop

2.5

nm

Linearity error, for the entire travel range**2%

Repeatability (bidirectional)
10 % travel range

2

nm

Sensor type

Incremental

Drive type

PICMA®
Fast Multi-Channel Photonics
Alignment Systems

Active axes

Alignment
Scanning time of spiraled area scan
500 μm Ø***<5sScanning time of spiraled area scan
100 μm Ø***<1sScanning time of spiraled areascan 10 μm Ø***

<0.5

s

Scanning time, gradient scan, randomized
with ±5 μm (repeatability <0.01 dB)****

<0.3

s

Operating temperature range, mechanics

0 to 50°C

Operating temperature range,
controller

5 to 40°C

Cable length2m

MiscellaneousTechnical data specified at 20±3 °C.
*
The travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent.
The data for each axis in this table shows its maximum travel range, where all other axes and the pivot point are at the reference position.
See the dimensional drawings for the default coordinate system and pivot point coordinates of the hexapod. Changing the pivot point will reduce the travel
range in θX, θY, θZ. Changing the orientation of the coordinate system (e.g., when the optical axis is to be the Z axis), will change the travel range in X, Y, and Z.
** without polynomial linearization*** typical time span for scanning the entire area and moving to the highest intensity**** reaching the global maximum after first light has been foundAsk about customized versions.

Requirements for the
optical power meter

Unit

Output signal

Analog output, ideally converted
from linear to logarithmic

Output voltage range, max.

–5 to 5

Bandwidth, min.

1

kHz

Noise level, max.

–60

dBm

V

95

MOTION|POSITIONING

F-712.HA2, dimensions in mm. The systems on both sides
are identical and can be used as either sender or receiver.

F-712.HA2 Double-sided fiber alignment
system with two H-811 hexapods and two
NanoCube® Nanopositioners, integrated
mounting flanges. Image of actual model.

96

W W W. P I . W SFast Multi-Channel Photonics
Alignment Systems

Before dispatching, the P-616 Nanocube® is tuned to follow a circular trajectory in order to achieve
optimum results. The figure shows that the P-616 achieves almost perfect circular movement in any
combination of the three axes. The circle diameter is 5 μm at a frequency of 100 Hz. Position units
in micrometers.

97

MOTION|POSITIONING

F-712.MA1 High-Precision
Single-Sided Fiber Alignment System
Stacked Multi-Axis System for Aligning Fibers and Optical Components■

Integrated scan routines for fiber opticalignment■

Ideal for applications in silicon photonics■

Extensive software package■

Direct detection of the optical signal,
high-resolution analog input■

Position sensors for high accuracy andoperational reliability■

Automatic alignment of several fibers
in <0.2 s

F-712.MA1, dimensions in mm

Applications■ Alignment of Optical Components■ Silicon Photonics Alignment>> Extensive software package■ Wafer Probing of Photonic

Integrated Circuits>> Flexures>> PICMA® Multilayer piezo actuators>> Serial kinematics■ Testing and packaging of Photonic

Integrated Circuits
Technology Glossary ...................... page 124

98

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F-712.MA1

Unit

Motion and positioning
Number of active axes

6

Rough positioning
Active axes

X, Y, Z

Travel range in X, Y, Z

25, 25, 25

mm

Minimum incremental motion

3μm

Max. velocity

20

mm/s

Sensor type

Rotary encoder

Guide

Crossed roller guide

Drive typeDC motor

Fine positioning
Active axes

X, Y, Z

Travel range in X, Y, Z, closed loop

100

μm

Min. incremental motion, open-loop

0.3

nm

Min. incremental motion, closed-loop

2.5

nm

Linearity error, for the entire travel range*

2%

Repeatability (bidirectional)
10 % travel range

2

nm

Sensor type

Incremental

Drive type

PICMA®

Scanning time of spiraled area scan
500 μm Ø**<3sScanning time of spiraled area scan
100 μm Ø**

<0.3

s

Scanning time of spiraled area scan
10 μm Ø**<0.2

sScanning time, gradient scan, randomized
with ±5 μm (repeatability <0.01 dB)***

<0.3

s

Fast Multi-Channel Photonics
Alignment Systems

Alignment

Miscellaneous
Operating temperature range, mechanics–20 to 65°C

Operating temperature range, controller

5 to 40°C

Cable length

3mTechnical data specified at 20±3 °C.
* without polynomial linearization** typical time span fod scanning the entire area and moving to the highest intensity*** reaching the global maximum after first light has been foundAsk about customized versions.

Requirements for the
optical power meter

Unit

Output signal

Analog output, ideally converted
from linear to logarithmic

Output voltage range, max.

–5 to 5

Bandwidth, min.

1

kHz

Noise level, max.

–60

dBm

V

99

MOTION|POSITIONING

F-712.MA2 High-Precision
Double-Sided Fiber Alignment System
Stacked Multi-Axis System for Aligning Fibers and Optical Components■

Integrated scan routines for fiber optic alignment■

Ideal for applications in silicon photonics■

Extensive software package■

Direct detection of the optical signal, high-resolution analog input■

Position sensors for high accuracy and operational reliability■

Automatic alignment of several fibers in <0.5 s■

Simultaneous alignment of the transmitter and receiver

Fast and high-precision drives
The basis of the fiber alignment system is a very stiff XYZ setup consisting of
three motorized linear stages and a P-616 NanoCube® nanopositioner. The low
overall height simplifies integration in limited installation space. The motorized
drives make longer travel ranges possible and at the same time, the NanoCube®
nanopositioner ensures fast scanning motion and dynamic compensation ofdrift effects. Flexure guides and all-ceramic insulated PICMA® actuators guarantee a long lifetime. Because all drives are equipped with position sensors,
it is possible for example, to reliably prevent collisions with expensive siliconwafers.

Applications■ Alignment of Optical Components■ Silicon Photonics Alignment>> Extensive software package■ Wafer Probing of Photonic

Integrated Circuits>> Flexures>> Parallel Kinematics, Hexapods>> PICMA® Multilayer piezo actuators■ Testing and packaging of Photonic>> Serial kinematics

Integrated Circuits

Technology Glossary ...................... page 124

100

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F-712.MA2

Unit

Motion and positioning
Number of active axes

12

Rough positioning
Active axes

X, Y, Z

Travel range in X, Y, Z

25, 25, 25

mm

Minimum incremental motion

3μm

Max. velocity

20

mm/s

Sensor type

Rotary encoder

Guide

Crossed roller guide

Drive typeDC motor

Fine positioning
Active axes

X, Y, Z

Travel range in X, Y, Z, closed loop

100

μm

Min. incremental motion, open-loop

0.3

nm

Min. incremental motion, closed-loop

2.5

nm

Linearity error, for the entire travel range*

2%

Repeatability (bidirectional)
10 % travel range

2

nm

Sensor type

Incremental

Drive type

PICMA®

Scanning time of spiraled area scan
500 μm Ø**<6sScanning time of spiraled area scan
100 μm Ø**<1sScanning time of spiraled area scan
10 μm Ø**<0.5

sScanning time, gradient scan, randomized
with ±5 μm (repeatability <0.01 dB)***

<0.3

s

Fast Multi-Channel Photonics
Alignment Systems

Alignment

Miscellaneous
Operating temperature range, mechanics–20 to 65°C

Operating temperature range, controller

5 to 40°C

Cable length

3mTechnical data specified at 20±3 °C.
* without polynomial linearization** typical time span fod scanning the entire area and moving to the highest intensity*** reaching the global maximum after first light has been foundAsk about customized versions.

Requirements for the
optical power meter

Unit

Output signal

Analog output, ideally converted
from linear to logarithmic

Output voltage range, max.

–5 to 5

Bandwidth, min.

1

kHz

Noise level, max.

–60

dBm

V

101

MOTION|POSITIONING

F-712.MA2, dimensions in mm. The systems on both sides
dentical and can be used as either sender or receiver.
are identical102

W W W. P I . W SFast Multi-Channel Photonics
Alignment Systems

Before dispatching, the P-616 Nanocube® is tuned to follow a circular trajectory in order to achieve
optimum results. The figure shows that the P-616 achieves almost perfect circular movement in any
combination of the three axes. The circle diameter is 5 μm at a frequency of 100 Hz. Position units
in micrometers.

103

MOTION|POSITIONING

F-712.PM1 Optical Power Meter
Ideal for Applications in Silicon Photonics■

Large signal bandwidth of 20 kHz■

High dynamic range■

Wavelength range 400 to 1550 nm■

Current input range to 1 mA■

Logarithmic output

F-712.PM1, dimensions in mm

Applications>> Extensive software package■ Fiber Alignment>> Flexures■ Silicon Photonics Alignment>> Parallel Kinematics, Hexapods>> PICMA® Multilayer piezo actuators
Technology Glossary ...................... page 124

104

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F-712.PM1

Unit

Wavelength range

400 to 1550*

nm

Connectors

FC/PC, FC/APC

Tolerance

Optical input

Polarization dependence

None

Minimum input power at 1550 nm

85nW

Maximum input power at 1550 nm

85mW

Average noise at 1550 nm

<10

nW

Current input
Connectors

BNC

Minimum input current

0

Maximum input current

1

mA

Average noise

<120

pA

OutputBNC

Output signal

Analog, logarithmic

Voltage range–5 to 5

V

Bandwidth (3dB)

20

kHz

Logarithmic increase1

V/10 dB

Output voltage at 85 mW, 1550 nm≈ +5**

V

Output voltage at 85 nW, 1550 nm≈ –1.2**V

Output voltage at 1 mA input current+5

V

Operating voltage

12 to 24

V

Power consumption

2.4

W

Overall mass

0.6

kg

Relative humidity

20 to 70%

Operating temperature range

5 to 40°C

Storage temperature range–10 to 50

°C

typ.

Fast Multi-Channel Photonics
Alignment Systems

Connectors

Miscellaneous

Not condensing* See “Drawings and Imagesʺ for a typical course of sensitivity.
Individual measurement report on the exact distribution of sensitivity in scope of delivery.
** Measurement report in scope of delivery.
The exact calculation of the light output is described in the documentation supplied.

Typical sensitivity curve depending on the wavelength

105

MOTION|POSITIONING

Motion Control

106

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108

C-887.52x Hexapod Motion Controller ..........................................................................
C-887.53x Hexapod Motion Controller with EtherCAT® .................................................
C-886.31 Parallel Kinematics Controller .........................................................................

108
110
114

Accessories ..............................................................................................................................................................................

116

C-887.MC Manual Control Unit for Hexapods ...............................................................
C-887.5xxx Hexapod Cable Sets ....................................................................................
C-887.MSB Motion Stop Box .........................................................................................

116
117
118

Motion Control

Hexapod Controllers ................................................................................................................................................................

107

MOTION|POSITIONING

C-887.52x Hexapod Motion Controller
Compact Bench-Top Device for Controlling 6-Axis Systems■

Sophisticated controller using vector
algorithms■

Commanding in Cartesian coordinates■

Easy customization of coordinate systems
by command■

Analog interfaces and motion stop optional■

Extensive software package

C-887.5xx, dimensions in mm. Version-dependent interfaces

Functions
Position input via Cartesian coordinates, coordinate transformation handled by the controller. To simplify integration of the hexapod, thereference system (Work, Tool) can be quickly andeasily changed. The real-time operating systemprevents jitter and therefore guarantees constantly low response times. Stable, virtual pivot point
can be freely defined in space. Data recorder forrecording of operating data such as motor control, velocity, position or position errors. Macro
programming. An autostart macro allows standalone operation. The controller supports motor
brakes and absolute-measuring sensors with
BiSS interface.

>> Extensive Software Package

Technology Glossary ...................... page 124

108

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C-887.52
C-887.521
C-887.522
C-887.523
Function

6-axis controller for hexapods, incl. control of two additional single axes
Compact benchtop device
Extending the functionality of C-887.52:
C-887.521: Additional analog inputs
C-887.522: Additional motion stop
C-887.523: Additional motion stop and analog inputs

Drive type

Servo motors (hexapod and single axes)

Motion and control
Controller type32-bit PID controller

Trajectory proﬁlesJerk-controlled generation of dynamics proﬁle with linear interpolation

Processor

Intel Atom dual core (1.8 GHz)

Servo cycle time

100 μsEncoder input

AB (quadrature) differential TTL signal, 50 MHz
BiSS

Stall detection

Servo off, triggered by position error

Reference point switch

TTL

Electrical properties
Hexapod control

12-bit PWM signal, TTL, 24 kHz

Hexapod power supply

24 V

Maximum output current

7A

Communication interfaces

TCP/IP, RS-232
USB (HID, manual control unit)

Hexapod connection

HD Sub-D 78 (f) for data transmission
M12 4 (f) for power supply

Connectors for single axes

Sub-D 15 (f)I/O lines

HD Sub-D 26 (f):4 × analog input (-10 to 10 V, via 12-bit A/D converter)
4 × digital input (TTL)
4 × digital output (TTL)

Analog inputs

C-887.521 and C-887.523 only:
2 × BNC, –5 V to 5 V, via 16-bit A/D converter, 5 kHz bandwidth

Input for motion stop

C-887.522 and C-887.523 only:
M12 8 (f)Command set

PI General Command Set (GCS)

User software

PIMikroMove

Application programming interfaces

API for C / C++ / C# / VB.NET / MATLAB / Python, drivers for NI LabVIEW

Manual control

Optional: C-887.MC manual control unit for hexapods

Motion Control

Interfaces and operation

Miscellaneous
Operating voltage

24 V (external power adapter for 100 to 240 V AC,
50 / 60 Hz in the scope of delivery)

Maximum current consumption

8A

Operating temperature range

5 to 40 °C

Mass

2.8 kgDimensions

280 (320) mm × 150 mm × 103 mm
Power adapter: 170 mm × 85 mm × 42.5 mm

109

MOTION|POSITIONING

C-887.53x
Hexapod Motion Controller with EtherCAT ®
Control a 6-Axis Positioning System via Fieldbus Interface

Digital controller with EtherCAT
fieldbus interface
Digital controller for hexapods (6-axis parallel kinematics) with DC motors.
Additional control for two further single axes is integrated. Can be integrated
seamlessly into automation systems in industry and research. Performs coordinate transformation for parallel kinematics. Customer requires a higher-level
PLC control for position commanding and feedback in Cartesian coordinates(EtherCAT master with CoE protocol).

■Integration into an automation system■

Synchronous motion in 6 axes■

Cycle time 1 ms■

Commanding in Cartesian coordinates■

Analog interfaces and motion stop optional

Supported operating modes
Reference move of the hexapods to the middle position of all six axes. Absolute positioning in six Cartesian axes. Cyclic position commanding via PLC forsynchronization with further automation components. Operation is possible
via TCP/IP or RS-232 without PLC master. The controller functionality then corresponds to a C-887.52x. Commanding of the hexapods is then done directly
via the PI GCS.

>> EtherCAT® Fieldbus Interface>> Extensive Software Package
Technology Glossary ...................... page 124

110

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C-887.53
C-887.531
C-887.532
C-887.533
Function

6-axis controller for hexapods, incl. control of two additional single axes
Compact benchtop device with EtherCAT interface
Extending the functionality of C-887.53:
C-887.531: Additional analog inputs
C-887.532: Additional motion stop
C-887.533: Additional motion stop and analog inputs

Drive typeDC motors (hexapod and single axes)

EtherCAT Speciﬁcations
Fieldbus protocol

EtherCAT (CoE = CANopen over EtherCAT)

Drive proﬁleCiA402 Drive Proﬁle (IEC 61800-7-201)

Cycle time

1 ms

Supported modes of operation

Reference move (homing mode)
Positioning mode with cyclical target position via the PLC(cyclic synchronous position mode)Conﬁguration mode (initially for startup)

Supported modes of synchronization

Distributed Clock (DC) mode; SyncManager (SM) mode

Motion and control
Controller type32-bit PID controller

Trajectory proﬁlesJerk-controlled generation of dynamics proﬁle with linear interpolation

Processor

Intel Atom dual core (1.8 GHz)

Servo cycle time

100 μsEncoder input

AB (quadrature) differential TTL signal, 50 MHz
BiSS

Stall detection

Servo off, triggered by position error

Reference point switch

TTL

Electrical properties
Hexapod control

12-bit PWM signal, TTL, 24 kHz

Hexapod power supply

24 V

Maximum output current

7A

Communication interfaces

2 x RJ45 for EtherCAT (In/Out)
TCP/IP, RS-232
USB (HID, manual control unit)

Hexapod connection

HD Sub-D 78 (f) for data transmission
M12 4 (f) for power supply

Connectors for single axes

Sub-D 15 (f)I/O lines

HD Sub-D 26 (f):4 × analog input (-10 to 10 V, via 12-bit A/D converter)
4 × digital input (TTL)
4 × digital output (TTL)

Analog inputs

C.887.531 and C-887.533 only:
2 x BNC, –5 V to 5 V, via 16-bit A/D converter, 5 kHz bandwidth

Input for motion stop

C-887.532 and C-887.533 only:
M12 8 (f)Command set

PI General Command Set (GCS)

User software

PIMikroMove

Application programming interfaces

API for C / C++ / C# / VB.NET / MATLAB / Python, drivers for NI LabVIEW

Manual operation

Optional: C-887.MC control unit for hexapods

Motion Control

Interfaces and operation

Miscellaneous
Operating voltage

24 V (external power adapter for 100 to 240 V AC, 50 / 60 Hz in the scope of delivery)

Maximum current consumption

8A

Operating temperature range

5 to 40 °C

Mass

2.8 kgDimensions

280 (320) mm × 150 mm × 103 mm
Power adapter: 170 mm × 85 mm × 42.5 mm

111

MOTION|POSITIONING

C-887.53x, dimensions in mm. Version-dependent interfaces

112

W W W. P I . W SExample configuration: H811 miniature hexapod with C-887.532 motion controller
with EtherCAT interface and motion stop. The EtherCAT master, here a Beckhoff controller,
is provided and programmed by the customer.

(Fieldbus
Master)Cartesian
NominalPosition

Cartesian
ActualPositionPI
Hexapod

PI Hexapod Controller
Calculation of
Inverse Kinematics
Fieldbus Slave
Interface

Fine Interpolation

Transformationof Encoder Values
to Cartesian
Coordinates

Motor
Controller with
Speed/Rotation
Angle Control
Motion Control

PLC/CNC

Integration of the hexapod motion controller into an automation system

113

MOTION|POSITIONING

C-886.31 Parallel Kinematics Controller
For Parallel-Kinematic Positioners with Q-Motion® Piezo Inertia Drive■

Sophisticated controller using vector
algorithms■

Commanding in Cartesian coordinates■

Easy customization of coordinate systems
by command■

Suitable for Q-Motion® SpaceFAB■

Can be optionally expanded by two single
axes■

Extensive software package

C-886, dimensions in mm, here without drive modules>> Extensive Software Package>> Q-Motion® Piezoelectric Inertia Drive
Technology Glossary ..................... page 124

114

W W W. P I . W S

C-886.31
FunctionController for parallel-kinematic positioners

Axes

6
Optional: 2 additional single axes

Motion and control
Drive type

Q-Motion® Piezo Inertia Drive
Optional single-axis drive type

Motor connection

Sub-D 15 (f)Controller type

PID controller

Servo cycle time of slave modules

50 μs

Cycle time of the C-886

10 ms

Encoder input

Sin / cos (differential), BiSS interface

Stall detection

Servo off, triggered by position error

Limit switches

2 × TTL per drive (polarity programmable)

Reference point switch

1 × TTL per drive

Characteristics of single axes

Depending on the drive type

Electrical properties
Output voltage

0 to 48 V

Max. output power

30 W per drive

Characteristics of single axes

Depending on the drive typeInterfaces and operation
Communication interfaces

TCP/IP: RJ45/Ethernet; USB: Mini-USB type B

Command set

PI General Command Set (GCS)

User software

PIMikroMove

Application programming interfaces

API for C / C++ / C# / VB.NET / MATLAB / Python, drivers for NI LabVIEW

Supported functions

User-deﬁned coordinate system. Startup macro.
Data recorder for recording operating data. Wave generator for periodic motion.

Miscellaneous
Operating voltage

External power adapter 24 V / 10 A in the scope of delivery

Max. current consumption

32 A

Operating temperature range

10 to 40 °C
4.4 kg without drive modules for single axes

Dimensions

482.6 mm × 132.55 mm × 278.55 mm
Motion Control

Mass

115

MOTION|POSITIONING

C-887.MC
Manual Control Unit for Hexapods
Easy Manual Operation

C-887.MC in practical use■

6 rotary knobs for independent positioning of all
Cartesian axes; velocity and step size can be set■

Additional pushbuttons for motion stop and referencing■

Display of the position of all Cartesian axes■

Display of velocity, errors or pivot point possible■

USB port for direct connection to the controller■

Functionality integrated in the firmware of the C-887 controller

Ordering Information
C-887.MC

Manual control unit for hexapods, USB connector, 3 m cable

116

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C-887.5xxx Hexapod Cable Sets
Description

LengthItem number

C-887.5B03

Hexapod cable set 3 m, dragchain compatible*, consisting of:Data transmission cable, HD Sub-D 78 f/m, 1:1
Power supply cable, M12 m/f, 1:1

3m
3m

K040B0270
K060B0262

C-887.5B05

Hexapod cable set 5 m, dragchain compatible*, consisting of:Data transmission cable, HD Sub-D 78 f/m, 1:1
Power supply cable, M12 m/f, 1:1

5m
5m

K040B0271
K060B0222

C-887.5B07

Hexapod cable set 7.5 m, dragchain compatible*, consisting of:Data transmission cable, HD Sub-D 78 f/m, 1:1
Power supply cable, M12 m/f, 1:1

7.5 m
7.5 m

K040B0295
K060B0223

C-887.5B10

Hexapod cable set 10 m, dragchain compatible*, consisting of:Data transmission cable, HD Sub-D 78 f/m, 1:1
Power supply cable, M12 m/f, 1:1

10 m
10 m

K040B0296
K060B0224

C-887.5B20

Hexapod cable set 20 m, dragchain compatible*, consisting of:Data transmission cable, HD Sub-D 78 f/m, 1:1
Power supply cable, M12 m/f, 1:1

20 m
20 m

K040B0297
K060B0225

C-887.5A50

Hexapod cable set 50 m,
consisting of:Line driver box for data transmission cable,
controller-side
Line driver box for data transmission cable,
hexapod-side
Short data transmission cable, HD Sub-D 78 f/m, 1:1
Long data transmission cable, HD Sub-D 44 f/m, 1:1,
three pieces
Power supply cable for hexapod-side line driverbox, with M12 connector (m)/M-12 connector (f)Power supply for hexapod, with M12 connector (f)and power cord
Würth snap-on ferrite, for hexapod power supply–

C887B0057–

C887B0058

3m
44 m

K040B0034
K040B0277

47 m

K060B0228

1.5 m**

C-887.5PS–

000012097* For specifications, see “Drag Chain Compatible Cables”** The length refers to the cable between the power supply and the hexapod

Drag Chain Compatible Cables

Cable length

3 / 5 / 7.5 / 10 / 20m

Maximum velocity

3m/s

Maximum acceleration

7.5

m/s2

Maximum number of bending cycles

1 million

Motion Control

Unit

C-887.5B03
C-887.5B05
C-887.5B07
C-887.5B10
C-887.5B20

Power supply cable
Operating temperature range–10 to +70°C

Minimum bending radius in a drag chain

94mm

Minimum bending radius with the ﬁxed
installation

57

mm

Outer diameter

7.5

mm

Operating temperature range–20 to +80°C

Minimum bending radius in a drag chain

67mm

Minimum bending radius with the ﬁxed
installation

102

mm

Outer diameter

10.2

mm

Data transmission cable

117

MOTION|POSITIONING

C-887.MSB Motion Stop Box

Ordering Information
C-887.MSB Motion stop box
for C-887 models with E-Stop socket

E-Stop socket with C-887.MSB
motion stop box

118

W W W. P I . W SMotion Control

119

MOTION|POSITIONING

Speciﬁc Software for Hexapod Systems

120

W W W. P I . W S

122Speciﬁc Softwarefor Hexapod Systems

Specific Software for Hexapod Systems .................................................................................................................................

121

MOTION|POSITIONING

Speciﬁc Software for Hexapod Systems

PIVeriMove
Restricted space can cause problems for both motion and positioning systems and the setups on the
motion platform as well as for the surroundings. Even when great care is taken during the design ofan experimental setup or a production unit, it is not always possible to avoid the risk of collision. The
PIVeriMove software calculates the permitted travel ranges for hexapods, if there are any obstacles in
the motion range: Whether a sample setup, other moving parts or the wall of the vacuum chamber.
The newly created configurations can be stored as the basis for the geometric calculations in the hexapod controller. The safety gap to the objects is checked online for each motion or position command.
This results in new limits for the positions that the hexapod is permitted to occupy.
The target positions and all points along the trajectory where a collision could take place, are checked
before being executed. If a collision is impending, the motion is not carried out. For extra safety, aminimum gap can be specified, which is added to the distance irrespective of the direction in space.
The pivot point, which is the reference point for rotation of the platform can be changed at any time.

Representation of complex setups in PIVeriMove

Representation of collisions (red area)

122

W W W. P I . W S

The acceptable load of the hexapod is exceeded: the SimuTool shows the respective values is red

Hexapod Simulation Tool
The limits of the workspace of parallel kinematics vary depending on the current position (translational and rotational coordinates), the current coordinates of the pivot point, and the chosen coordinate system. The scope of delivery of the PI hexapod
software includes a program that can be used to comfortably
calculate these limits and display them graphically. Mechanicalproblems can, therefore, be localized well before setting up theapplication.
The limit value for the load of the Hexapod varies as well depending on a number of factors:
The orientation of the hexapod■

The load and the position of the center of mass,■

The position (translation and rotation coordinates)of the motion platform as well as■

The forces and torques which act on the motion platformof the hexapod.

It is often desirable to implement the customer software earlyon without the system being available on site. PI supplies a suitable software that can be used to simulate a complete hexapod
system (hexapod mechanics and controller) as a virtual machineon the host-PC. This allows the customers to develop, test, andoptimize user programs even before the system is delivered.
For it to be used, the following third-party installation is required:
QEMU
QEMU is a free virtualization software which can emulate the entire hardware of the controller. Installation programs for Windows
are available here: 32 bit / 64 bit.
Speciﬁc Softwarefor Hexapod Systems■

Software Emulators – the Hexapod System
as a Virtual Machine

These influencing factors can be simulated with the PI Hexapod
Simulation Tool and possible issues can be solved early with thehelp of experienced PI sales engineers.

123

MOTION|POSITIONINGTerms and Technology GlossaryA
Absolute encoder
Sensor (encoder) for capturing changes of position or changesof angle. Signals from the absolute-measuring position sensor
are used for axis position feedback. Absolute target positions
can be commanded without the need of referencing.
ActiveDrive motor
The ActiveDrive Motor also integrates a servo amplifier into
the motor housing, which is driven in PWM mode (Pulse Width
Modulation). The operating voltage, which is mostly 24 V for
ActiveDrive motors, is supplied by a separate power supply.
Advantage: Lower costs, more compact design and higher
reliability compared to an externally cabled amplifier; a higher
degree of efficiency due to elimination of power loss between
the amplifier and motor; avoidance of radiation interference
because the amplifier and motor are built into the same shielded housing.
Area scan
Motion sequence that covers a predefined area. See “Scan routine”.

that drags the rotor; the motor is based more on the conceptof a synchronous machine. If sine commutation and a servo
amplifier are used for position control instead of block commutation, the term synchronous servo motor (SSVM) is often
encountered. Compared to DC motors, it is possible to realize asmaller and lighter design and provide the same performance,
which results in a high ratio between the torque and the motor
size. At the same time, the drivetrain can be shorter for the same
travel range because the drive shaft is located inside the motor.

C
Center of rotation
See “Pivot point”.
Closed-loop operation
Additional position feedback makes it possible to operate motors in a closed servo loop. Both the commanded and theachieved position are measured and compared. Closed-loop
techniques are used to reach the target position optimally, toachieve a high position resolution, a uniform feed rate, and alarge dynamic range for velocity and acceleration.
Coordinate systems

B
Backlash
The position error that appears upon reversing direction. Backlash is caused by mechanical clearance in the drive train components, such as gearheads or bearings, or by friction in theguiding system. The backlash depends on temperature, acceleration, load, leadscrew position, direction, wear, etc. Backlash
can be reduced by the preload on the drive train. A position
measurement method, that can detect the position of the platform directly, eliminates all errors in the drive train (direct metrology).
Ball screw
In the case of ball screws, only rolling friction occurs, whichallows higher speeds, drive performance, and longer lifetime
than leadscrews. They are however, not self-locking.
Brushless DC motor (BLDC)
Compared to conventional DC motors, BLDC motors manage
without wear-prone brushes meaning that a considerably
longer lifetime is possible. Commutation is fully electronic andis generated completely by a rotating magnetic field in the stator

The position display, direction of motion, and center of rotation
for the motion platform of the hexapod are determined by coordinate systems. The coordinate systems are always right-handed systems. To adapt the motion trajectory perfectly to therequirements of the application, it is possible to define various
coordinate systems which refer, for example, to the position of
workpiece or tool.
Crossed roller guide
Crossed roller guides are comparatively stiff and manage withlow preload. This results in reduced friction with high load
capacity, high guiding accuracy, and smooth running. An additional forced cage control helps to prevent the roller bearing
from creeping.
CrosstalkDeviation from the ideal motion in axes perpendicular to thedirection of motion.
Linear errors are lateral runout such as xty = straightness,
xtz = flatness.
Angular errors are xrx = roll, xry = pitch, xrz = yaw.

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Dformation for parallel kinematics are performed by the hexapod
controller and do not affect the PLC. EtherCAT® is a registeredtrademark and patented technology, licensed by Beckhoff Automation GmbH, Germany.

Data recoder
Tool for the analysis of data and measured values. It stores datafrom various data sources such as position feedback of analog
inputs while displaying them as a function of time, and offers afast visualization.
DC motor
A DC motor exploits the force effect of the electrical current via
a pivoted conductor loop in a magnetic field. In conjunction with
servo controllers (see “servo motor”), these types of motors
allow high torques at low motor speeds, good dynamics overa large speed range, fast response, low heat generation as wellas smooth and vibration-free operation.
Design resolution
The theoretical minimum increment of movement that can becommanded to move or to detect. Design resolution must not be
confused with minimum incremental motion. In indirect position
measurement methods, values for screw pitch, gear ratio, motor
or sensor / encoder resolution, for example, are included in thecalculation of the resolution. In general, it is considerably below
the minimum incremental motion of a mechanical system.
Drag chain compatible cable
Drag chain compatible cables can be used in a cable carrier chain.
They are able to maintain their function despite being subjected
to a large number of bending cycles during their lifetime.
Drive typeDefines the types of drive supported by the controller / driver,such as DC motors, piezo stepping drives, piezo actuators, or
linear motors.

Extensive software package
Every PI controller is delivered with an extensive software package. The delivered user programs support the user in setting up
and parametrizing the overall system. The PIMikroMove user
software allows to display and command all connected controllers in the same graphical interface. Programming interfaces tointegrate a PI controller into own user programs are available forall common programming languages including NI LabVIEW and
MATLAB. Specific software tools for hexapods allow to simulate the motion range and determine the permissible forces.

F
Flexures
The motion of a flexure is based on elastic deformation of asolid, thus, avoiding any static, rolling or sliding friction. Flexureelements, such as joints and guiding systems, have high stiffness and high load capacity and they are very unsusceptible
to shocks and vibrations. They do not wear, require no maintenance, are completely vacuum compatible, work in a wide temperature range, and do not require any lubricants.
Firmware
Software that is installed on the controller.
FMPA
Acronym for “Fast Multichannel Photonic Alignment”.

GE

GearheadAn encoder is used for determining the position. Basically, adifference is made between linear and rotary encoders. Depending on the configuration, encoders operate either incrementallyor absolutely.
EtherCAT® fieldbus interface
PI hexapod controllers support EtherCAT®. EtherCAT (Ethernet
for Control Automation Technology) is an Open Real Time
Ethernet-based fieldbus system. The required coordinate trans-

Gearheads allow adjustment of the speed and the torque. The
ratio between gear output and gear input is defined as transmission ratio.
In the case of transmission reduction, this ratio is greater thanone, which results in a lower speed with a higher torque. The
opposite applies in the case of higher speeds. Typical types ofgears include for example, worm gears, spur gears, planetary
gears, bevel gears, and belt gears.

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Terms and Technology
Glossary

Encoder

Terms and Technology Glossary
Gradient searchHill-climb algorithm for signal optimization. See “Scan routine”.

H

is not possible. The linear motor does not require mechanicalcoupling elements to convert the rotation of the motor into linear motion as is the case with servo motors. Typically, 3-phasemotors are used.
Linearity error

Force on the motion platform that can be applied to the system
without moving even during a power-off state.

Deviation in motion direction, of measured position from commanded position. Measured with an external, traceable device.
The target and measured actual values of the positions are plotted against each other, a line is drawn through the first and last
data point, and the maximum absolute deviation is determined.

I

Load capacity

Incremental encoder

Maximum vertical load, when the stage is mounted horizontally.
The punctual center of gravity of the load is considered.

When incremental encoders are in motion, they generate
impulses that are counted by the controller. However, in contrast
to absolute encoders, it is a question of determining a relative
position. To determine an absolute position, a limit switch orreference point switch signal must also be referenced.

M

Holding force

L
Leadscrew
Leadscrews can achieve very high resolutions with smooth running and are often preloaded by springs to minimize backlash.
This results in sliding friction and therefore a self-locking effect.
However, this limits the speed, performance, and the lifetime.
Limit switch

Minimum incremental motion
The smallest motion that can be repeatedly executed is called
minimum incremental motion, or typical resolution, and is determined by measurements. The data table shows typical measured values. The minimum incremental motion differs in mostcases from the design resolution which can be considerably
smaller in numerical values. See also “Design resolution”.

N
NEXACT® piezo walking drive

The nominal travel range of a positioner is defined by parameters, but can be secured by limit switches that switch the motor
current off when the limit switch has been reached.
Function: Optical, magnetic.
Linear encoder
Linear encoders measure the position of a linear actuator directly. Thus, a higher accuracy is achieved in comparison to rotary
encoders, because nonlinearity, mechanical play, and elastic
deformation have no influence.
Linear motor
A linear motor is an electromagnetic direct drive that generates
straight linear motion. The range of a linear motor is practically unlimited. A linear measuring system is always required formotion and positioning; open loop operation of a linear motor

Precision piezo motor that creates the walking motion by meansof piezo bending elements in order to move a runner. The drives
are very compact and achieve high velocities around 10 mm/s,
and forces up to 10 N. A suitable selection of the piezo elements
optimizes step size, clamping force, velocity, and stiffness for therespective applications.
NEXLINE® piezo walking drive
High-load piezo motor that combines piezo clamping and shear
actuators in order to move a runner. The drives feature particularly high force of several 100 N, and high and stiffness. They arecapable of dynamically compensating oscillations in the range
of a few micrometers with nanometer resolution. Furthermore
the drives are designed for positioning and holding forces of up
to 800 N, and work at velocities of about 1 mm/s.
Nonlinearity
See “Linearity error”.

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OOpen-loop operation
The actuator is used without a position sensor. Creep, nonlinearity and hysteresis remain uncompensated. Open-loop operation is ideal for applications where fast response and very highresolution with maximum bandwidth are essential. Here, commanding and reading the target position in absolute values iseither not important or carried out by external position sensors.
Open-loop operation is not possible for electro-magnetic directdrives, such as linear motors and voice-coil drives. Stepper
motors are frequently used in open-loop mode where counting
the steps is used to determine the position. Missing steps occur
when the stage is not designed according to the desired load
and motion profile.

time, the PICMA® actuators are very dynamic and can reach aposition with a hitherto unattained precision. This is the reason why they are used as micropumps in metering technology.
Due to their ceramic insulation, PICMA® actuators exhibit highreliability and climate resistance. PI (Physik Instrumente) also
equips PICMA® actuators with individual connections for customer applications.
PICMAWalkPICMAWalk drives achieve feed forces up to 50 N and holding
forces to 60 N. The maximum velocity is 15 mm/s. PICMAWalkuses the proven PICMA® multilayer piezo actuators. That means
lower piezo voltages to 120 V. PICMA® piezo actuators also
ensure a long lifetime and the outstanding reliability of the
PICMAWalk technology.

Optical power meter

PiezoWalk® drives take advantage of the piezo walking principle
and combine a subnanometer resolution with high forces, arobust design, and a scalable travel range. Industry customers
use walking drives for travel ranges greater than 1 mm and to
hold a stable position with nanometer precision resolution. PI(Physik Instrumente) offers walking drives with high feed forces
as well as positioning and holding forces, but also relatively highvelocities, and they also have a long lifetime in a vacuum. See“NEXLINE®”, “NEXACT®”, and “PICMAWalk”.

An optical power meter converts optical power to an electric
signal.

PILine® ultrasonic piezomotors

Maximum permissible temperature range in which the device
can be operated safely.
Operating voltage
Allowed control input voltage range (also input frequency) for
the supply of the device.

PI owns a large variety of patents on piezo and motor technology.

PILine® Ultrasonic piezomotors are precise, dynamic, small, andsilent, and replace classical drive technologies, because thedrives are also self-locking. As a result, they don’t have to besupplied with current when at rest and that, in turn, reduces theenergy requirements of the application. For this reason and dueto their small size, the drives are very popular for mobile devices
in the optical industry and measuring technology.

Parallel kinematics, hexapods

PIMag® magnetic linear motors

Hexapods are parallel-kinematic systems with six drives thatare connected directly to a single platform. This makes it possible for users to position objects automatically in all degrees
of freedom, X, Y, Z, and rotatory and, depending on the drive,with an accuracy in the micrometer range or lower. The parallel-kinematic system is very stiff, with only a low passive weight
to move and, with the corresponding design, can carry loads of
up to several tons.

Magnetic direct drives from PI (Physik Instrumente) provide a
direct and stiff connection between the load to be moved andthe drive. The industry demand is particularly high when objects
need to be positioned with high dynamics and precision. Thanks
to the smooth-running precision linear guides with crossed roller bearings, these types of linear motor stages are particularly
suitable for applications that require constant-velocity scanning.
The drives operate without contact and therefore very reliable.
Users can integrate the magnetic direct drives into existingmachines and systems quickly and easily via standardized fieldbus systems. See “Linear motor”, “Torque motor”.

P
Patents

PICMA® multilayer piezo actuators
PICMA® actuators take advantage of the indirect piezoelectriceffect and achieve high forces with relatively low voltages. They
only need a small amount of installation space. At the same127

MOTION|POSITIONING

Terms and Technology
Glossary

PiezoWalk® walking drive

Operating temperature range

Terms and Technology Glossary
PIMag® voice coilThanks to their low weight and friction-free drive principle, voicecoil drives are small and particularly suitable for applications
that require high dynamics and high velocities over limited travel ranges – for example, in medical technology. Voice coil drives
have a greater advantage for the customer when compared to
traditional drive screw-based solutions, particularly with respect
to wear and dynamics. High scan frequencies and precision
positioning are possible with these drives, because they are freeof hysteresis effects. See “Voice Coil Drive”.

is self-locking, requires no current, and does not generate any
heat. It holds the position with maximum force. It is therefore
suitable for battery-powered, mobile applications with a low
number of load cycles.

R
Reference point switch

PIMikroMove

In combination with incremental position encoders, it is necessary to use a reference point to determine the absolute position.
Function: Optical, magnetic.

User software with graphic user interface (GUI) to control any PI
positioning system, independently of the drive principle.

Repeatability

Pivot point
Freely definable reference or center point for rotation of theplatform.

Typical values in closed-loop operation mode (RMS, 1). Repeatability is a percentage of the total distance or angle traveled. For
small ranges, repeatability may be significantly better.
Rotary encoder

Power consumption
Maximum power consumption under full load.
Profile generator
Functionality of motor controllers that allows motion profiles
such as linear interpolation, point-to-point, trapezoid, double
bends. See “Trajectory generator”.
Pulse width modulation (PWM)
PWM-controlled motors allow control of the (motor) performance with a high-frequency-signal. This means that the powersignal can be separated from the digital control signal. PWM
control is used, for example, with high-performance switching
amplifiers for piezo actuators, or for controlling electric motors
such as (BL)DC-motors, linear motors or voice coil drives. The“ActiveDrive Motor” is a special feature from PI, see there.
PZT
Acronym for plumbum (lead) zirconate titanate. Polycrystalline
ceramic material with advanced piezoelectric properties. Often
also used to refer to a piezo actuator or translator.

Rotary encoders that are mounted directly on the motor shaft
measure the position indirectly. That means that they areattached to a rotating part of the drivetrain. Easy installation of
the sensors is an advantage but backlash and mechanical playaffect the precision of the position feedback.

S
Scan routine
Algorithm that executes a motion sequence and allows to evaluate corresponding data, e.g. search for an optimized analog
input signal. Examples are “Area scan”, “Gradient search”.
Sensor resolution
The smallest calculable increment that can be detected by themeasuring system used. Rotary encoder: Number of counts per
rotation. Linear encoder: Smallest increment still detected by thesensor system used. Drivetrain design and interpolation is notconsidered in the sensor resolution, but in the “Design resolution”, see there.
Serial kinematics

Q
Q-Motion® piezoelectric inertia drive
Piezo inertia drives are space-saving and affordable piezo-based
drives with relatively high holding forces and a virtually unlimited travel range. With an operating frequency of up to 20 kHz,the drives reach velocities of more than 5 mm/s that act directly on the runner. The Q-Motion® drive operates silently at the
maximum operating frequency of 20 kHz. When at rest, the drive

In a serial kinematics set-up each actuator acts on its own platform. There is a clear relationship between actuators and motion
axes. The advantages are the relatively simple assembly andmulti-axis control. The dynamic characteristics depend on theindividual axis and the set-up of the serial kinematics, where thelower axes need to carry the upper axes resulting in high forces
and lower dynamics. Guiding errors accumulate and the overall
guiding accuracy is poorer if compared to “Parallel kinematics”,
see there.

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Servo motor

Stiffness

A motor with position detection and control is called a servo
motor. The motor itself is often a DC motor. Servo motors offer
high torques at a low speed, good dynamics over a large speed
range, fast response, low heat generation as well as smooth andvibration-free operation. Either incremental or absolute rotary
encoders are used for detecting the position. A servo amplifier
takes care of amplifying the signal and controlling the motor
parameters. This is normally a PID controller (Proportional, Integral, Derivative) with additional filters in order to exploit theabove-mentioned characteristics as best as possible.

Static stiffness in motion direction. The force acts in the direction of the motion axis.

SpaceFABs are alternative parallel-kinematic set-ups with constant strut lengths that allow for an especially low profile. The
six degrees of freedom are achieved by moving a passive strut
in two or more axes: In a SpaceFAB, an XY arrangement of linear stages moves the individual struts. This mechanical layout
allows for an asymmetric design, e.g., longer travel ranges in
one selected direction of motion.
Specification
Performance specifications are tested before delivery for eachsystem. Some specifications are not available in combinations,for example, moving maximum payload at maximum speed at
maximum operating temperature may not be possible. Performance specifications are valid for room temperature (22 ±3 °C)
and closed-loop systems are calibrated at this temperature(specifications for different operating temperatures on request).
Recalibration is recommended for operation at significantly
higher or lower temperature. Custom designs for ultralow orultrahigh temperatures on request.
Stepper motor
Stepper motors only take discrete positions within one revolution. A position can be commanded with a constant step size
without an additional encoder. The achievable step size is specified by the motor control. Intelligent wiring of the individual
poles allows a so-called microstep mode, which, depending on
the type, is able to realize several hundreds of thousands ofmicrosteps between the full steps by electrical interpolation.
However, step losses and the associated positioning errors canbe the result in the case of excessively high loads and accelerations as well as resonance effects if an additional encoder is
not used. High speeds are only possible with high numbers of
steps, which however, prevents reaching the achievable torque.
A mechanical damper on the motor shaft, which also works as
handwheel, supports smooth running. To hold position without
a self-locking gearhead, stepper motors must be supplied withcurrent, which can then lead to jittering. Nevertheless, stepper
motors offer a very long lifetime and, compared to DC motors,
are especially suited to applications with reduced dynamics andin a vacuum.

See “Crosstalk“.
Synchronous servo motor (SSVM)
A servo motor that is designed as a synchronous machine. This
type of motor for example, can be realized from a brushless DC
servo motor with sine commutation (see brushless “DC motor”
and “servo motor”).

T
Threaded roller drive screw
In the case of threaded roller drive screws, the contact surface
between the drive screw, roller, and nut is considerably larger
than with ball screw drives. This results in a very high stiffnessand higher loads are possible.
Torque motor
Torque motors are mainly brushless DC motors that are optimized for high torques or classical servo drives with a highnumber of poles. On the other side, it is possible to envisage
torque motors as rolled-up linear motors. In contrast to conventional servo drives, torque motors achieve lower speeds but
are able to achieve very high torques at medium to low speeds.
The torque generated by a torque motor increases squared to
the rotor diameter. As a rule, the rotor is a hollow shaft. When
compared to the usual servo drives, the length of the installation
space is not used and this allows low-profile dimensions. Torquemotors represent a zero-play and stiff direct drive and can reachhigh positioning accuracy and repeatability with a high load.
The high drive torque also allows higher accelerations and theassociated high dynamics.
Trajectory control
Provisions to prevent deviation from the specified trajectory.
Can be passive (e.g., flexure guidance) or active (e.g., using
additional active axes and sensors).
Trajectory generator
A profile generator for multi-axis systems with known kinematics and interpolation. Hexapod controllers support linear interpolation, point-to-point, trapezoid, s-curve. See ”Profile generator”.

129

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Terms and Technology
Glossary

SpaceFAB design

Straightness

Terms and Technology Glossary
V

Typical applications include short-range motion with fast settling times, applications with low noise generation, or sensitive
programmable force controls.

Vacuum-compatible versions
In a large number of industry sectors, production in a vacuum
is becoming increasingly more important. Therefore, PI (Physik
Instrumente) offers various different drive technologies to its
customers that can be operated in a vacuum of 10–7 or even 10–10
hPa. This includes piezo actuators that work in strong magnetic
fields and in a cryogenic environment, piezo systems with travel
ranges lower than 1.5 mm and subnanometer precision, piezomotors in a variety of designs with respect to force, dynamics,
and travel range, as well as classical motorization with speciallydesigned DC or stepper motors that allow greater travel ranges.
Voice coil drives
These friction-free electromagnetic linear drives are characterized by their good dynamics, albeit with relatively low holding
force.

W
Wave generator
Each axis can be controlled by a wave generator that outputs
waveforms. The wave generator is particularly suitable for dynamic applications, in which the axis performs arbitrary, userdefined motion profiles.
Workspace
The entirety of all combinations of translations and rotations
that the hexapod can approach from the current position isreferred to as the workspace.

Voice coil motors are direct drives. The drive principle is thetechnical implementation of the Lorentz force: The force thata live conductor exerts in a permanent magnetic field is proportional to the magnetic field strength and the current. The
motion controller controls the force via PWM control. The drive
is combined with a measuring system for precision positioning
and operated in a closed loop. The travel ranges of voice coildrives are therefore limited by the technology and are between
0.5 mm and 25 mm.

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C-886.31 Parallel Kinematics Controller ....................................................................................................................................
C-887.MC Manual Control Unit for Hexapods ...........................................................................................................................
C-887.MSB Motion Stop Box ....................................................................................................................................................
C-887.52x Hexapod Motion Controller ......................................................................................................................................
C-887.5xxx Hexapod Cable Set .................................................................................................................................................

114
116
118
108
117

F-712.HA1 High-Precision Single-Sided Fiber Alignment System .............................................................................................
F-712.HA2 High-Precision Double-Sided Fiber Alignment System ...........................................................................................
F-712.HU1 Fast Multi-Channel Photonics Alignment System ...................................................................................................
F-712.MA1 High-Precision Single-Sided Fiber Alignment System ............................................................................................
F-712.MA2 High-Precision Double-Sided Fiber Alignment System ...........................................................................................
F-712.PM1 Optical Power Meter ................................................................................................................................................

92
94
88
98
100
104

H-206 6-Axis Alignment System ...............................................................................................................................................
H-810 6-Axis Miniature Hexapod ..............................................................................................................................................
H-811.F2 6-Axis Miniature Hexapod ..........................................................................................................................................
H-811.I2/I2V 6-Axis Miniature Hexapod .....................................................................................................................................
H-811.S2 6-Axis Motion Hexapod .............................................................................................................................................
H-820 6-Axis Hexapod ...............................................................................................................................................................
H-824 6-Axis Hexapod ...............................................................................................................................................................
H-825 6-Axis Hexapod ...............................................................................................................................................................
H-840 6-Axis Hexapod ...............................................................................................................................................................
H-845 Heavy-Duty Hexapod ......................................................................................................................................................
H-850 6-Axis Hexapod ...............................................................................................................................................................
H-860 6-Axis Motion Hexapod ..................................................................................................................................................

48
40
36
32
72
64
46
44
60
66
56
76

Q-821 Q-Motion® Miniature SpaceFAB Robot ...........................................................................................................................
Q-845 Q-Motion® SpaceFAB ......................................................................................................................................................

50
52

131

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Terms and Technology
Glossary

Product Index

Physik Instrumente (PI) GmbH & Co. KG
Auf der Roemerstrasse 1, 76228 Karlsruhe
Germany
Phone +49 721 4846-0
Fax+49 721 4846-1019
info@pi.ws
www.pi.ws
General Management: Dr. Karl Spanner, Dr. Peter Schittenhelm, Markus Spanner;
Commercial Register: Reg.-Gericht Mannheim: HRA 104804; VAT-No.: DE 1431 828 03;
WEEE-Reg.-No.: DE 93978928;
General Partner: Physik Instrumente (PI) Verwaltungs GmbH;
Commercial Register: Reg.-Gericht Mannheim: HRB 109941;
Although the information in this document has been compiled with the greatest care, errors cannot be ruled out completely.
Therefore, we cannot guarantee for the information being complete, correct and up to date. Illustrations may differ
from the original and are not binding. PI reserves the right to supplement or change the information provided without
prior notice.
The company names or marks listed below are registered trademarks of Physik Instrumente (PI) GmbH & Co. KG: PI®, PIC®,PICMA®, PILine®, PIFOC®, PiezoWalk®, NEXACT®, NEXLINE®, PInano®, NanoCube®, Picoactuator®, Nanoautomation®, NEXSHIFT,
PicoCube, PiezoMove, PIMikroMove, PIMag®
The company names or marks listed below are registered trademarks of their owners:
μManager, EtherCAT, LabVIEW, Leica, Linux, MATLAB, MetaMorph, Microsoft, National Instruments, Nikon, Olympus, Windows, Zeiss.
CAT136E Hexapod Positioning Systems 08/2018 3.0. ® Physik Instrumente (PI) GmbH & Co. KG 2018.
Subject to change without notice.
All contents, including texts, graphics, data etc., as well as their layout, are subject to copyright and other protective laws.
Any copying, modification or redistribution in whole or in parts is subject to a written permission of PI.

132

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MOTION|POSITIONING

Headquarters

Subsidiaries

GERMANY

USA (East) & CANADA

USA (West) & MEXICO

Physik Instrumente (PI)GmbH & Co. KG
Auf der Roemerstrasse 176228 Karlsruhe
Phone +49 721 4846-0
Fax+49 721 4846-1019
info@pi.ws
www.pi.ws

PI (Physik Instrumente) L.P.
Auburn, MA 01501
www.pi-usa.us

PI (Physik Instrumente) L.P.
Irvine, CA 92620
www.pi-usa.us

PI miCos GmbH
Freiburger Strasse 30
79427 Eschbach
Phone +49 7634 5057-0
Fax+49 7634 5057-99
info@pimicos.com
www.pi.ws
PI Ceramic GmbH
Lindenstrasse
07589 Lederhose
Phone +49 36604 882-0
Fax+49 36604 882-4109
info@piceramic.com
www.piceramic.com

USA (San Francisco Bay Area)

UK & IRELAND

PI (Physik Instrumente) L.P.
Sausalito, CA 94965
www.pi-usa.us

PI (Physik Instrumente) Ltd.
Cranfield, Bedford
www.physikinstrumente.co.uk

ITALY

NETHERLANDS

Physik Instrumente (PI) S. r. l.
Bressowww.pionline.it

PI Benelux B.V.
Sint-Oedenrode
www.pi.ws/benelux

FRANCESPAIN

PI France SAS
Aix-en-Provence
www.pi.ws

Micos Iberia S.L.
Vilanova i la Geltrú
www.pimicos.es

JAPAN
PI Japan Co., Ltd.
Tokyo
www.pi-japan.jp

PI Japan Co., Ltd.
Osaka
www.pi-japan.jp

CHINA
Physik Instrumente(PI Shanghai) Co., Ltd.
Shanghaiwww.pi-china.cn

Physik Instrumente(PI Shanghai) Co., Ltd.
Beijing
www.pi-china.cn

SOUTHEAST ASIA

TAIWAN

PI (Physik Instrumente)
Singapore LLP
Singaporewww.pi-singapore.sg
For ID / MY / PH / SG / TH / VNM

Physik Instrumente (PI)Taiwan Ltd.
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KOREA
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PI Korea Ltd.
Seoul
www.pikorea.co.kr

W W W. P I . W S