Electron- and Ion Microscopy
N O N M A G N E T I C A N D VA C U U M - C O M PAT I B L E A C T U AT O R S
AND POSITIONING SYSTEMSW W W. P I . W S

Particle Beam Microscopy:
Much More Than Just High Resolution
Particle beam microscopy, based on negatively charged particles, which means electrons or positively
charged particles, ions from so different materials such as helium, neon or gallium, makes examinationand manipulation possible into the subnanometer range with extremely high resolutions. Today,
processes based on charged particles are used in applications that go far beyond the field of researchand even in the industrial environment.

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W W W. P I . W SRaster scans for imaging surfaces, analyzing the material composition, crystallographic analyses, creating
3-D models – SEM, TEM and Cryo-TEM are versatile
tools that are used in semiconductor technology, materials research and life sciences as well as for a myriad of
quality assurance tasks. Systems with integrated ion
beam columns are used for preparation processes, suchas the creation of TEM lamellas or drilling holes with
precisely defined dimensions, for the removal of sample
material or for the deposition of materials at a nanoscale. These types of systems are often and quite rightly
referred to as “Nanolab”.

ticularly compact and offer positioning in up to six
degrees of freedom. Suitable control electronics andcontrollers are available for all systems and can be integrated seamlessly into existing systems thanks to boththeir analog and digital interfaces and the extensive
software support.

All of these procedures and applications place the highest
demands on the imaging modules and on the adjustment
systems of the individual beam guidance components
such as for example, apertures. Positioning the sample
also needs to be just as precise. This task is made moredifficult in particle beam microscopes, because there isa vacuum or even high vacuum, so the motion modules
themselves, the lubricants used in them, and the feed
cables must not be allowed to gas out. In addition, themodules must be nonmagnetic in order to avoid affecting
the beam path.

Customized solutions

PI offers drives, actuators, and multi-axis positioning
systems that require no lubricant and are also vacuum
compatible. Drive concepts from PI based on in-housedevelopment of piezo technology do not generate any
magnetic fields and are not influenced by them.

The products shown here represent only a small selectionof all positioning solutions available from PI. Specialized
applications often require specific properties that need
to be adapted and examples of these are travel ranges,
mechanical coupling, and dimensions. We would be very
happy to collaborate with you to develop a solution foryour positioning task. Take our word for it!

The increasingly automated test procedures with SEM
and TEM require flexible, reliable drive solutions in orderto do scans with high repeatability and stable positioning.
Nonmagnetic and vacuum compatible:
Actuator technology and positioning systems from PI
Based on many years of know-how, particularly in piezo
technology, PI provides a broad range of drive systems
for precisely these requirements. Simple actuators can be
integrated for feeding the electron beam, where they areused to correct the beam guidance or to adjust apertures.
Linear and rotation stages are suitable for positioning thesample and can be combined easily to build multi-axis
solutions. Parallel-kinematic multi-axis stages are par-3

MOTION|POSITIONING

Piezo technology –the basis for several drive types

Piezo technology developed and manufactured
exclusively by PI Ceramic, a PI subsidiary, forms
the basis for several drive types that are ideally suited for use in particle beam microscopy.
PICMA® piezoceramic multilayer actuators are
the starting point for piezo drives. Basically, piezo
actuators are vacuum compatible to 10–11 hPa
and do not generate magnetic interference. The
motion of these extremely compact piezo actuators is based on solid-state effects, and in principle, this makes their resolution unlimited. Theirvery high stiffness enables high force generation and dynamics with response times in the
microsecond range. Flexible cross sections anddisplacements allow them to be adapted according to the application. Thanks to the all-ceramic
insulation, actuators have a longer lifetime.

Excellent Guiding Accuracy Through Flexure Joints

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The travel range of a piezo actuator can also be multiplied by integrating a levermechanism. The actuator is mechanically integrated in a flexure joint in such a
way that the travel range is extended to up to 2 mm. The motion of a flexurejoint is based on the elastic deformation of a solid. This avoids any static, rollingor sliding friction. Their advantages are the high stiffness, load capacity, andwear resistance. Flexures are maintenance-free, can be manufactured fromnonmagnetic materials, do not require lubricants or consumables and hence
also function, without any problem, in a vacuum.

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Positioners based on Piezo Actuators
PI offers a wide range of products that have been developedon the basis of piezo actuators. Piezo actuators do not require
lubricants or cause abrasion. The PICMA® all-ceramic isolated
actuators do not require polymer insulation and are therefore
ideal for UHV applications. Their motion is based on crystalline

solid state effects and is therefore wear-free. The piezo effect isbased on electric fields, so piezo actuators neither generate nor
are they affected by magnetic fields. The piezo effect exists evenat lowest temperatures up to close to 0 Kelvin.

S-330 Piezo Tip/Tilt Platform
The S-330 Piezo Tip/Tilt platform finds numerous applications in optical systems.
The travel range of the piezo actuators in the S-330 tilting platform is multipliedby the integration of flexure guides.
nResolution to 20 nradnSub-ms response timen

Excellent position stabilitynParallel kinematics for higher accuracy anddynamics and full bridge strain gauge sensors

P-752 High-Precision Nanopositioning Stagen

Highest linearity due to capacitive sensors

nResolution 0.1 nm

nRepeatability: ±1 nmnTravel range to 35 µmnFriction-free flexure guides for very high travel accuracy

P-733.3 XYZ Piezo NanopositionernTravel ranges to 100 µm × 100 µm in X, Y and to 10 µm in ZnUltrahigh vacuum-compatible and nonmagnetic versionsnZero-play, high-precision flexure guide systemnParallel kinematics for higher accuracy and dynamics

P- 563 PIMars Nanopositioning Stagen

Highest linearity due to capacitive sensors

nRepeatability in X/Y/Z: 2/2/2 nm

nTravel range to 300 × 300 × 300 µmn

UHV versions to 10–9 hPanZero-play, high-precision flexure guide system
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Piezomotor Technologies in Detail
PILine®
Ultrasonic Piezomotor

Piezo Inertia Drive

PiezoWalk®
Piezo Stepping Drive

Sub-micrometer resolution

Sub-nanometer resolution

Sub-nanometer resolution

Very high operating frequency

Very high operating frequency

Velocity up to 10 mm/s

Noiseless drive

Noiseless drive

High-dynamics scan mode

High velocity of up to several 100
mm/s

Velocity of more than 10 mm/s

Long travel ranges, only limitedby the runner lengthLong travel ranges, only limitedby the runner lengthLong travel ranges, only limitedby the runner length

Forces up to 40 N

Forces up to 10 N

Self-locking at rest

Self-locking at rest

Very high forces of up to 800 N(NEXLINE®)
Self-locking at rest

Ideal for:
Positioning with sub-µm a­ ccuracyn	nFast step-and-settlenScan mode with high velocitiesn

Operation at constant low velocity

Nanometer-precise ­positioning
stable over a prolonged periodn	Quasi-static applications with low
to medium holding forcen	Nanometer-precision positioningn	Quasi-static
applications with highholding forcen	Travel ranges of up to a few mmn	Coarse and fine adjustmentn	Force generationn	Active vibration insulationn	Operation at constant low velocity

n	

Scale
Sensor
RunnerLateralGuiding

Coupling
Element
Piezoelectric
Actuator
Preload

PILine® ultrasonic drives develop very highfeed rates and position in the sub-micrometer range. The piezoceramic actuator is
excited to ultrasonic vibrations with ahigh-frequency AC voltage between 100
and 200 kHz. Deformation of the actuatorleads to a periodic diagonal motion of thecoupling element, relative to the runner.
The high frequencies result in high velocities of several 100 mm/s.

Inertia drives are based on a single piezo
actuator and make use of a simple drive
principle, which also allows nanometerprecision positioning. They make use of
the stick-slip effect (inertia effect) – a cyclical alternation of static and sliding friction
between a moving runner and the drive
element generated by the piezo element.
At an operating frequency above 20 kHz,
these drives reach a continuous feed atvelocities of more than 10 mm/s.

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W W W. P I . W S

In PiezoWalk® drives such as NEXACT®,NEXLINE® and PICMAWalk, piezo actuators work in pairs as clamping and feedelements on a moving r­ unner. Cyclicalcontrol induces a stepping motion of theactuators on the runner, and the runneris moved forwards and backwards.
NEXACT® offers nanometer resolution at­v elocities of up to 10 mm/s, whereas
NEXLINE® drives are used for high force
generation.

PILine® Ultrasonic Piezomotors –Compact Drives, Fast and Self-Locking
U-521.24V PILine® Linear Stage
Travel range to 18 mm

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Bidirectional repeatability ±0,2 µm
Velocity: 200 mm/s
Vacuumversion (to 10–6 hPa) available

U-751.24V PILine® XY Stage
Travel range: 25 x 25 mm

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Bidirectional repeatability: ±0,3 µm
Velocity: 100 mm/s

Non-magnetic vacuumversion (to 10–6 hPa)on request
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U-653 PILine® Rotation Stagen

Rotation range: 360°

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Velocity: 360°/snNon-magnetic vacuumversion (to 10–6 hPa)

Bidirectional repeatability: ±54 µrad7

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Space-saving and inexpensive drives
based on the inertia effectN-422 Linear Actuator with Piezo Motor
Travel range: 35 mm

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Push/pull force (active): 7 N / Holding force (passive): to 10 NnResolution depends on the sensor / drive: sub nm

nVelocity: to 5 mm/snVacuum-/cleanroom compatible (to 10–7 hPa) andnon-magnetic

Q-545 Q‑Motion® Precision Linear Stage
Travel range 13 / 26 mm (depending on version)

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Drive force: 7 N
Maximum load capacity: 0.5 kg (horizontal) / 0,1 kg (any axis)
Bidirectional repeatability (depending on version):
100 / 200 nm
Velocity to 8 mm/s
Vacuum version (to 10–9 hPa): on request

N-470.V / N-470.U PiezoMike Linear Actuator
Travel range 7.5 mm to 26 mm, step size 20 nm (typ.)

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Feed force (active) 22 N / Holding force (passive) >100 N
self-locking at rest, requires no current, and does not
generate any heat
Lifetime >1.000.000.000 steps
Non-magnetic, vacuum compatible to 10–6 hPa (version V)
to 10–9 hPa (version U)

Drive Principle of the PiezoMike
The piezo actuators expands slowly when an electric voltage isapplied. This expansion leads to a rotation of the claw. Since theclaw grasps around the screw, the claw turns the screw when it
rotates (stick effect). Once the piezo actuator has attained its
maximum expansion, it quickly contracts and the claw returns
to its initial position. With the fast contraction, the claw slips
around the screw. The screw, however, stays in its initial position(slip effect) due to its inertial mass. This stick-slip cycle can be
repeated any time to achieve the desired feed forward of thescrew's tip by turning the screw. Of course, the motion also
works in the other direction.

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W W W. P I . W S

Fine-thrat screw
Claw
Piezo actuator
PreloadNanometer Precision and a High Feed Forcewith PiezoWalk® Walking Drives
N-216 NEXLINE® Linear Actuator
Travel range to 20 mm

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Force generation to 600 N / Holding Force to 800 N
Resolution: 0.03 nm (open loop) / – 5 nm (closed loop)
Velocity to 1 mm/s
Suitable for cleanrooms and under vacuum conditions /non-magnetic

N-310 NEXACT® OEM Miniature Linear Motor / ActuatornTravel range 10 to 125 mm, variable runner lengths

nFeed force: to 10 N / Holding force: to 12 NnResolution: 0.03 nm (open loop) / –5 nm (closed loop)n

Velocity: to 10 mm/snSuitable for cleanrooms and under vacuum conditions /non-magnetic

P-911 UHV-Compatible Miniature Piezo Hexapod
The space-saving parallel-kinematic design allows for the low
overall height of less than 90 mm and a diameter of only 100 mm.
NEXLINE® piezo stepping motor drives and integrated incremental
sensors ensure a position resolution down to 0.1 µm in the linearaxes.
nUHV-compatible to 10–9 hPan

Non-magneticnWith NEXLINE® piezo stepping drivesnUltra-high precision flexure joints

N-331 PICMAWalk Walking Drive
Travel range 10 to 100 mm, variable runner lengths

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Push/pull force (active) to 50 N / Holding force(passive) to 60 N
Resolution: 0.02 nm (open loop) / <10 nm (closed loop)
Velocity: to 15 mm/s
Suitable for cleanrooms and under vacuum conditions /non-magnetic

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MOTION|POSITIONING

From 1-off to Series:
OEM Customers Benefit From Maximum Flexibility

Standardized performance control with full documentation of individual measurement charts

PI serves both the research and industrial markets. The complete control over the design and manufacturing process provides ourcustomers with significant competitive advantages. Optimized processes allow PI to deliver customized products in quantities up
to several 100,000 units per year at low cost and right on time. The range of OEM products offered by the PI Group varies widely,
ranging from “bare” actuators and sensors to highly integrated parallel-kinematic positioning systems. Evaluation of pre-production
run samples, test procedures, production processes and quality management are all included in the development process.
ServicesnGlobal account management: Close proximity to the customer thanks to international presencenRisk assessment from design to deliverynDepending on the task: From the drive to the turnkey systemn

Copy exactly policynPreparation of internal and external certificationnProduction of series of several 10,000 units in the shortest timen

Sustainable spare parts servicenManufacturing and testing capacities from functional samples to mass production

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W W W. P I . W SSupport Services – Extended Warranty –PI Express Service
PI is dedicated to supporting its customers right from the initial consultation through to when a customer has purchased a PI system.
Beyond that, PI’s services division is committed to ensuring that every aspect of owning a PI system is catered for. Supported byfour Global Service Hubs in Asia, China, Europe and USA, with field product specialists working from these hubs, PI is able to support all technologies and customer applications via this global services team. PI has different service types in addition to the standard
service offered today. The services are described below and can be tailored to each customer’s specific needs.

Standard
SupportExtendedWarranty

ExtendedWarranty
PLUS

PI Express

PI Express
PLUS(Parts and Labour cover for
manufacturing defects)

ü

ü

ü

ü

ü

Access to PI’s Service Support Desk

Regional Support
For 2 Years

Regional Support
For up to 5 Years

Regional Support
For 3 Years

Regional Support
For up to 5 Years

Regional Support
For up to 5 Yearsüü

Optional

Optionalü

Optional

Optional

ü

ü

ü

ü

24 Months Warranty(TRT = Target Response Time)
Standard Working Hours
8:00 –16:00

TRT <12 working
hours

TRT <12 working
hours

TRT <12 working
hours

TRT < 4 working
hours

TRT < 4 working
hours

Extended Warranty(Parts and Labour costs covered
for manufacturing defects –1, 2 or 3 additional years)

Extended Warranty PLUS

(Extended warranty, plus coverfor replacement parts that faildue to normal Wear and Tear.*)

Extended Hours Support(Access to PI’s Global Support teamproviding ad hoc planned out ofhours support services)

Highest Priority Remote &On-Site** Support
Spares Holding(Dedicated holding of spare parts/
systems to minimise unscheduled
downtime)üStandard Support
This is the service level that all customers receive today. PI will respond to any customer’s support request whether inside or outsideof a valid warranty period. PI’s remote support service is free of charge and while products are under warranty, customers benefit
from a 12 working hour target response time, from the initial customer contact.
Extended Warranty
PI’s Extended Warranty delivers wrap around protection for customers with the option to extend the product warranty cover period
for up to 5 years. Extended Warranty can provide cost protection from any latent defects, service level response times for supportenquiries and priority service for warranty repairs and fault analysis.
PI Express Service
PI’s express subscription is the highest priority support service. If a customer experiences a product failure, PI will provide express
remote support, express on-site response if required and can also ship out a dedicated spare system, to get the customer operational
again as quickly as possible.
>> More information about PI services at www.pi.ws/service*	A normal wear and tear failure is defined as damaged that has been caused due to ordinary use. Wear and tear failures that are excluded for non-ordinary use might bewhere the system has been exposed to radiation; liquid or third party abrasive particles have entered the mechanics; the application or operation is beyond the statedcapacity of the system (orientation, load, travel limits, environment); or where user error or an external force has been applied that caused the failure. Maximum 2 claims
over the 3 year term.
** All on-site services are chargeable in advance at the on-site rate depending on customer location.

MOTION|POSITIONING

11|

POSITIONING

Headquarters

ACS Motion Control

PI Subsidiaries

GERMANYISRAELUSA (East) & CANADA

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Fax+49 721 4846-1019
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Phone +972-4-6546440
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Phone +49 7634 5057-0
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Phone +49 36604 882-0
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BRO37E Electron- and Ion Microscopy 08/2019 0.2. Subject to change without notice. © Physik Instrumente (PI) GmbH & Co. KG 2019

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