PIglide Air Bearing
Products & Technology
N A N O M E T E R P R E C I S I O N , M U LT I - A X I S M O T I O N ,S TA N D A R D & C U S T O M D E S I G N S

MOTIONW
I .I W
SI N G| WPW
O .SPI T
ONPIglide Technology

The Step Ahead with Air Bearing Technology

FLEXIBLE AXISCONFIGURATION

NANOMETER PRECISION, SINGLE- & MULTIAXIS MOTIONnSingle axis linear stagesnFrictionless high-precision positioningnRotary stagesn

Excellent velocity stabilityn

XY Planar Scanners

nExcellent guiding accuracy up to 5 µrad/100 mmn

Active yaw control for gantries

bearings

nDirect drive linear & torque motors for smooth, high speed scanningn

Hemispherical bearingsnState of the art controls powered by ACS Motion ControlnRotary air bearing spindlesn N on-motorized linear and rotary

EXPERIENCE WITH AIR BEARING TECHNOLOGYMATTERS FOR OEMS
PI is building on over 200 man-years of in-house air bearing experience andoffers comprehensive precision air bearing motion control and positioning
products and systems. With more than 4 decades of experience in piezo nanopositioning systems design and motorized precision positioning equipment,
the air bearing systems capabilities are a natural and logical extension of PI’s
precision motion offerings.

2

W W W. P I . W S

PIglide Technology

Simulation of the magnetic field B of a reluctance motor. This drive principle
allows a higher power density than can be achieved with voice coil drives andmakes for most compact motors with maximum force generation.

CUSTOMIZATION
PI is in the unique position to cover the whole motion range from finger-tip
sized nano-positioners to large scale stages with long travel ranges, througha plethora of different drive and guiding systems tailored exactly to thecustomer’s needs. By combining extremely responsive engineering consultative support and lean manufacturing techniques, PI is able to provide thehighest quality customer service. Maximum performance of precision systems
is achieved thru extensive design and analysis expertise, using equipment
built inhouse with proprietary techniques.

OEM USERS BENEFIT FROM TECHNOLOGICAL
BREADTH

CORE TECHNOLOGYINHOUSE
Having all the core technologies available in-house allows PI to design andmanufacture excellent products. Optimum performance is achieved by extensive simulations of relevant components, from the magnetic field for the
motor layout, the FEM simulations ofstages, to the control algorithm design.
Keeping the number of parts low secureshigh reliability of the system.

PI serves both the research and industrial markets. The complete control overthe design and manufacturing process provides our customers with significant competitive advantages, as PI can modify and customize its products
in all areas, from drive and sensor technology, to the control technology andsoftware.
All system components are developed, manufactured and tested in-house.
Optimized processes allow PI to deliver customized products in quantities up
to several 100,000 units per year at low cost and right on time.
The range of OEM products offered by the PI Group varies widely, ranging
from “bare” actuators and sensors to highly integrated parallel-kinematic
positioning systems. Evaluation of pre-production run samples, test procedures, production processes and quality management are all includedin the development process.
3

MOTION|POSITIONING

PIglide Technology

Characteristics of Air Bearings

VELOCITY STABILITY AND SCANNING
The lack of mechanical bearing elements means there is nothing to getin the way of smooth, controlled velocity (stability to better than 0.01%).
Experiments and processes like inertial sensor testing, tomography,
wafer scanning, and surface profiling require continuous motion at tightly
controlled speeds are best served by air bearing systems.

REPEATABILITY OF HIGH-PRECISIONPOSITIONING
A direct-drive motor and high-resolution encoder can position a moving
carriage supported by an air bearing to within nanometers in a linear
application or within tenths of arc-seconds in rotational applications. The
lack of friction and mechanical contact means there is minimal vibration,hysteresis or reversal error, making it highly repeatable and ideal for many
inspection and manufacturing operations. Stiction is virtually eliminated,
improving resolution capabilities and reducing in-position “hunting” (limit
cycling). Position repeatability can be obtained within a few fundamental
encoder counts. Similar precision can be obtained by piezo flexure guided
stages, however over much smaller travel ranges. Magnetic levitation isanother option.

STRAIGHTNESS AND
FLATNESSThe total error motion over full travel isusually specified in microns TIR (Total
Indicator Reading). TIR is specifying thepeak-to-peak measurement of error motion. Symmetry about a zero reference
is not assumed. Air bearing stages cantypically achieve better than 1 µm flatness
and straightness TIR for every 200 mm oftravel.

Typical specifications are:Linear: Straightness/Flatness 0.1 µm/25 mm, Pitch/Yaw 0.5 arcsec/25 mm
Rotary: Radial/Axial Runout 0.1 µm, Wobble <1 arcsec

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PIglide Technology

PIMag®
Magnetic Direct Drive Technology

Magnetic levitation guides achieveultimate precision in this linear
motor driven technology study

Drive technology and control know-how as well as an expertise in bearingsand encoders allow for a broad range of motors for system integration.
Proprietary developments also include high-resolution force sensors for
manufacturing and test equipment.

Guiding Systemsn P
 Iglide air bearings for frictionlessmotion and optimum straightness
and flatnessn A ctive magnetic guidings alignIronless Linear Motors

flatness during motionn H igh acceleration and velocityn L inear stages, planar scanners, PIMag® 6D positioning systemn T orque motors for rotation stagesVoice Coil Drivesn F lexure guidings provide friction-less motion over short strokesn B all and roller bearings from then H
 igh dynamics for fast scanning and positioning

leading suppliersn O
 EM actuators, linear scanners, Hexapodsn O ptional force sensors

Drive Technology Beyond Standardn H
 ighest accelerations up to 60 g with resonance motorn H
 ighest force density for single phase linear motors

with reluctance motor and cylindrical Halbach arraysn H
 igh force density and low weight with linear Halbach arrays

Dynamic 6-axis positioning withvoice coil drives, H-860 hexapod

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MOTION|POSITIONING

Linear Air Bearing
Stages

A-121 PIglide AT1
Linear Stage with Air Bearings
High Performance Small Footprint Nanopositioning Stagen I deal for scanning applications or high-precision

Accessories and options

positioningn E ncodernCleanroom compatiblen P
 Iglide filter and air preparation kitsnSize of the motion platform 115 mm × 115 mm

n M
 ulti-axis motion controller and servo drivesnTravel ranges to 350 mm

n X
 Y setups and individual configurationsn

Low profile of 60 mm

n C
 able track variationsn

Resolution to 1 nmn C
 ounterbalance options for vertical assemblyn B ase plates made of granite and systems for reducing

vibration
The PIglide AT1 series of air bearing stages is equipped witha servo drive linear motor with preloaded air bearings andintegrated linear encoder. The combination of these noncontact components results in a frictionless motion platformthat offers the highest performance, quality, and life.

Fields of application

A high-force linear motor can drive the stage to top speed
within a few milliseconds. The dovetail preloaded air bearing
design in this model will support normal, vertical, and sidemounted orientations.

Thanks to the friction-free motion, no particles are formed,
which makes PIglide stages ideal for cleanroom applications.

PIglide positioning systems are ideally suited for many highprecision applications, such as metrology, photonics, andprecision scanning as well as in semiconductor or flat panel
display manufacturing.

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W W W. P I . W S

A-121.050

A-121.100

A-121.150

A-121.200

A-121.250

A-121.350

Unit

Tolerance

Active axes

X

X

X

X

X

X

Travel range

50

100

150

200

250

350

Pitch*

12

12

15

20

25

35

µrad

max.

Yaw*

12

12

15

20

25

35

µrad

max.

Straightness /Flatness*

±0.5

±0.5

±0.5

±0.75

±0.75

±1.25

µm

max.

Straightness /Flatness per 25 mmtravel range*

0,1

0,1

0,1

0,1

0,1

0,1

µm

max.

Velocity, unloaded**

1

1

1

1

1

1

m/s

max.

Acceleration,
unloaded**

20

20

20

20

20

20

m/s²

max.

Load capacity in z***

100

100

100

100

100

100

N

max.

Load capacity
in y***

40

40

40

40

40

40

N

max.

Moved mass

1,2

1,2

1,2

1,2

1,2

1,2

kg

Overall mass

3,5

4,2

4,5

5,2

5,7

6,8

kg

Air
bearingAirbearingAirbearingAirbearingAirbearingAirbearing

Drive typeLinear
motor,
ironless,
3-phaseLinear
motor,
ironless,
3-phaseLinear
motor,
ironless,
3-phaseLinear
motor,
ironless,
3-phaseLinear
motor,
ironless,
3-phaseLinear
motor,
ironless,
3-phaseIntermediate
circuit voltage,effective

48,
nominal80, max.

48,
nominal80, max.

48,
nominal80, max.

48,
nominal80, max.

48,
nominal80, max.

48,
nominal80, max.

Linear Air Bearing
StagesMotion andpositioningmm

Mechanicalproperties

Guide type
Drive properties

V DC

Peak force

33,2

33,2

33,2

33,2

33,2

33,2

N

typ.

Nominal force

11,1

11,1

11,1

11,1

11,1

11,1

N

typ.

Force constant,effective

6,67

6,67

6,67

6,67

6,67

6,67

N/A

typ.

Resistancephase-phase

6,3

6,3

6,3

6,3

6,3

6,3

Ω

typ.

Inductivity
phase-phase

1

1

1

1

1

1

mH

typ.

Back EMF
phase-phase

7,7

7,7

7,7

7,7

7,7

7,7

V·s/m

max.

External,
movingcable

External,
movingcable

External,
movingcable

External,
movingcable

External,
movingcable

External,
movingcable

Cabling

A-121
Operatingpressure##
Air consumption

*
**
***
##

65 to 75 psi (450 to 620 kPa)
<1.0 SCFM (28 SLPM)

Air quality

Clean (filtered to 1.0 μm or better) - ISO 8573 1 Class 1
Oil free – ISO 8573 1 Class 1
Dry (–15 °C dew point) – ISO 8573 1 Class 3

Materials

Hardcoat aluminum, stainless steel fasteners

Dependent on the flatness of the surface, on which the stage is mounted.
Can be limited by the payload, controller or drive.
Assumes payload CG is centered no more than 50 mm above the stage table.
To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller.

MOTION|POSITIONING

7

Linear Air Bearing
StagesIntegrated Sensor
Sensor signal

A-121.xxxA

A-121.xxxB

A-121.xxxC

Incremental linear encoder

Absolute encoder

Incremental linear encoder

Sin/cos, 1 V peak-peak,
20 µm signal period

BiSS-CA/B quadrature, TTL

Sensor resolution

Controller dependent

1 nm

50 nm

Bidirectional
repeatability

A-121.050: ±0,25 µm
A-121.100: ±0,25 µm
A-121.150: ±0,25 µm
A-121.200: ±0,25 µm
A-121.250: ±0,25 µm
A-121.350: ±0,50 µm

A-121.050: ±0,25 µm
A-121.100: ±0,25 µm
A-121.150: ±0,25 µm
A-121.200: ±0,25 µm
A-121.250: ±0,25 µm
A-121.350: ±0,50 µm

A-121.050: ±0,25 µm
A-121.100: ±0,25 µm
A-121.150: ±0,25 µm
A-121.200: ±0,25 µm
A-121.250: ±0,25 µm
A-121.350: ±0,50 µm

Accuracy,
uncompensated#

A-121.050: ±1,0 µm
A-121.100: ±1,0 µm
A-121.150: ±1,5 µm
A-121.200: ±2,0 µm
A-121.250: ±2,0 µm
A-121.350: ±3,0 µm

A-121.050: ±1,5 µm
A-121.100: ±1,5 µm
A-121.150: ±1,5 µm
A-121.200: ±1,5 µm
A-121.250: ±1,5 µm
A-121.350: ±1,5 µm

A-121.050: ±1,0 µm
A-121.100: ±1,0 µm
A-121.150: ±1,5 µm
A-121.200: ±2,0 µm
A-121.250: ±2,0 µm
A-121.350: ±3,0 µm

Accuracy,
with error
compensation#

A-121.050: ±0,50 µm
A-121.100: ±0,50 µm
A-121.150: ±0,50 µm
A-121.200: ±0,50 µm
A-121.250: ±0,50 µm
A-121.350: ±1,0 µm

A-121.050: ±0,5 µm
A-121.100: ±0,5 µm
A-121.150: ±0,5 µm
A-121.200: ±0,5 µm
A-121.250: ±0,5 µm
A-121.350: ±0,5 µm

A-121.050: ±0,50 µm
A-121.100: ±0,50 µm
A-121.150: ±0,50 µm
A-121.200: ±0,50 µm
A-121.250: ±0,50 µm
A-121.350: ±1,0 µm# 	Improved accuracy can be obtained with controller-based error compensation.
Accuracy values assume short-term time duration and do not consider the long-term effects of thermal drift on the stage.

A-121, dimensions in mm

A

8A-121.050
A-121.100
A-121.150
A-121.200
A-121.250
A-121.350

240
290
340
390
440
540

B

C

D

E

F

G

100

75
100
125
150
150
200

25
50
75
100
125
175

30
55
80
105
130
180

4
4
6
6
6
10

126.5
151.5
176.5
201.5
226.5
276.5

W W W. P I . W S

Linear Air Bearing
Stages

A -123 PIglide AT3
Linear Stage with Air Bearing
High Performance Nanopositioning Stagen I deal for scanning applications or high-precision

Accessories and options

positioningn

Encodern C leanroom compatiblenPIglide filter and air preparation kitsn S
 ize of the motion platform 210 mm × 210 mmnSingle and multi-axis motion controllern T ravel ranges 50 mm to 750 mmn

XY setups and individual configurationsn R
 esolution to 1 nmnCable track variationsn

Options with counterweight for vertical (Z) orientationnCustomizations available

The PIglide series of stages is equipped with a servo drive
linear motor with preloaded air bearings and integrated
linear encoder. The combination of these noncontact components results in a frictionless motion platform that offers
the highest performance, quality, and lifetime.
A high-force linear motor can drive the stage to top speed
within a few milliseconds, and the high-capacity bearings
can support payloads up to 60 kg. The laterally opposed,
actively preloaded air bearing design in this model allows
mounting in any orientation.

n B ase plates made of granite and systems for reducing

vibration
Fields of application
PIglide positioning systems are ideally suited for high-precision application in measuring technology, fiber positioning,
semiconductor and flat screen inspection, laser processing,and precision scanning.
Thanks to the friction-free motion, no particles are formed,
which makes PIglide stages ideal for cleanroom applications.

9

MOTION|POSITIONING

Linear Air Bearing
Stages

A-123.050

A-123.100

A-123.150

A-123.200

A-123.350

A-123.500

A-123.750

Unit

Travel range

50

100

150

200

350

500

750

mm

Pitch*

5

10

15

15

20

25

35

µrad

max.

Yaw*

5

10

15

15

20

25

35

µrad

max.

Straightness /Flatness*

±0.5

±0.5

±0.5

±1

±1.5

±1.5

±2.5

µm

max.

Straightness /flatness per 25 mmtravel range*

±0.5

±0.5

±0.5

±0.75

±0.75

±1.25

µm

max.

Unit

Tolerance

A-123

Tolerance

Motion andpositioning
Active axes

X

Velocity,
unloaded**

1

m/s

max.

Acceleration,
unloaded**

30

m/s²

max.

Load capacity in z***

590

N

max.

Load capacity
in y***

295

N

max.

Moved mass

5kg

A-123.050: 14
A-123.100: 15.5
A-123.150:16.5
A-123.200: 18
A-123.350: 21.5
A-123.500: 25
A-123.750: 32

kg

Mechanicalproperties

Overall mass

Guide typeAir bearing

Drive properties
Drive typeIntermediate circuit
voltage, effective

Linear motor, ironless,3-phase48, nominal 80, max.

V DC

Peak force

298

N

typ.

Nominal force

87,5

N

typ.

Force constant,effective

19,9

N/A

typ.

Resistancephase-phase

3,6

Ω

typ.

Inductivity
phase-phase

1,2

mH

typ.

Back EMF
phase-phase

16

V·s/m

max.

75 to 85 (515 to 585)

psi
(kPa)

<1.0 (28)SCFM(SLPM)Air supply
Operating pressure#
Air consumption
Air quality

Clean (filtered to 1.0 μm or better) – ISO 8573‑1 Class 1
Oil free – ISO 8573‑1 Class 1
Dry (–15 °C dew point) – ISO 8573‑1 Class 3

Miscellaneous
Cabling
Materials

10

*
**
***
#

External, moving cable
Hardcoat aluminum, stainless steel fasteners

Dependent on the flatness of the surface, on which the stage is mounted.
Can be limited by the payload, controller or drive.
Assumes payload CG is centered no more than 50 mm above the stage table.
To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller.

W W W. P I . W S

A-123.xxxB

A-123.xxxC

Incremental linear encoder

Absolute encoder

Incremental linear encoder

Sensor signal

Sin/cos, 1 V peak-peak,
20 µm signal period

BiSS-CA/B quadrature, TTL

Sensor resolution

Controller dependent

1 nm

50 nm

Bidirectional
repeatability

A-123.050: ±0.25 µm
A-123.100: ±0.25 µm
A-123.150: ±0.25 µm
A-123.200: ±0.25 µm
A-123.350: ±0.5 µm
A-123.500: ±0.5 µm
A-123.750: ±0.75 µm

A-123.050: ±0.25 µm
A-123.100: ±0.25 µm
A-123.150: ±0.25 µm
A-123.200: ±0.25 µm
A-123.350: ±0.5 µm
A-123.500: ±0.5 µm
A-123.750: ±0.75 µm

A-123.050: ±0.25 µm
A-123.100: ±0.25 µm
A-123.150: ±0.25 µm
A-123.200: ±0.25 µm
A-123.350: ±0.5 µm
A-123.500: ±0.5 µm
A-123.750: ±0.75 µm

Accuracy,
uncompensated##

A-123.050: ±1 µm
A-123.100: ±1 µm
A-123.150: ±1.5 µm
A-123.200: ±2 µm
A-123.350: ±3 µm
A-123.500: ±3.5 µm
A-123.750: ±5 µm

A-123.050: ±1.5 µm
A-123.100: ±1.5 µm
A-123.150: ±1.5 µm
A-123.200: ±1.5 µm
A-123.350: ±1.5 µm
A-123.500: ±1.5 µm
A-123.750: ±1.5 µm

A-123.050: ±1 µm
A-123.100: ±1 µm
A-123.150: ±1.5 µm
A-123.200: ±2 µm
A-123.350: ±3 µm
A-123.500: ±3.5 µm
A-123.750: ±5 µm

Accuracy, with error
compensation##

A-123.050: ±0.5 µm
A-123.100: ±0.5 µm
A-123.150: ±0.5 µm
A-123.200: ±0.5 µm
A-123.350: ±1 µm
A-123.500: ±1 µm
A-123.750: ±1.5 µm

A-123.050: ±1.5 µm
A-123.100: ±1.5 µm
A-123.150: ±1.5 µm
A-123.200: ±1.5 µm
A-123.350: ±1.5 µm
A-123.500: ±1.5 µm
A-123.750: ±1.5 µm

A-123.050: ±0.5 µm
A-123.100: ±0.5 µm
A-123.150: ±0.5 µm
A-123.200: ±0.5 µm
A-123.350: ±1 µm
A-123.500: ±1 µm
A-123.750: ±1.5 µm

Integrated Sensor

Linear Air Bearing
Stages

A-123.xxxA## 	Improved accuracy can be obtained with controller-based error compensation.
Accuracy values assume short-term time duration and do not consider the long-term effects of thermal drift on the stage.

A-123, dimensions in mm

A-123.050
A-123.100
A-123.150
A-123.200
A-123.350
A-123.500
A-123.750

A

B*

350
400
450
500
650
500
1050

100
100
100
100
100
100

C*

325
300
400

D*

E*

F

G

Hx

J

500
700

250
300
350
400
550
700
1000

25
50
75
100
175
250
375

31.5
56.5
81.5
106.5
181.5
256.5
381.5

4
8
8
8
12
16
16

181.5
206.5
231.5
256.5
331.5
406.5
531.5

11

* The mounting holes are symmetric around the center line located at “J”

MOTION|POSITIONING

Linear Air Bearing
Stages

A-110 PIglide LC
Linear Stage with Air Bearings
High-Performance Nanopositioning System with a good Pricen I deal for scanning applications or high-precision

positioningn C leanroom compatiblen S
 ize of the motion platform 160 mm × 200 mm
n T ravel ranges to 400 mm
n L
 oad capacity to 100 N

PIglide Reference-Class Linear Stage
PIglide positioning systems have a magnetic linear motor,
magnetically preloaded air bearings and an optical linear
encoder: Noncontact and friction-free motion for the highest
accuracy and reliability.
Accessories and optionsn E
 ncodern P
 Iglide Filter and Air Preparation Kitsn S
 ingle and multi-axis motion controllern X
 Y setups and individual configurationsn B
 ase plates made of granite and systems for reducing

vibration
Fields of application
PIglide positioning systems are ideally suited for many highprecision applications, such as metrology, photonics, andprecision scanning as well as in semiconductor or flat panel
display manufacturing.
Thanks to the friction-free motion, no particles are formed,
which makes PIglide stages ideal for cleanroom applications.

12

W W W. P I . W S

A-110.050xx

A-110.100xx

A-110.200xx

A-110.300xx

A-110.400xx

Unit

Tolerance

Active axes

X

X

X

X

X

Travel range

50

100

200

300

400

mm

Pitch*

10

20

30

40

50

µrad

max.

Yaw*

10

20

30

40

50

µrad

max.

Straightness / Flatness*

±1

±1

±1.5

±2

±2.5

µm

max.

Straightness / flatness per 10 mm

±1

±1

±1.5

±2

±2.5

µm

max.

travel range*

±10

±10

±10

±10

±10

nm

max.

Velocity, unloaded**

0.5

0.5

1

1

1

m/s

max.

Acceleration,
unloaded**

10

10

30

30

30

m/s²

max.

max.

Linear Air Bearing
StagesMotion andpositioning

Mechanicalproperties
Load capacity in z***

100

100

100

100

100

N

Moved mass

2.5

2.5

2.6

2.6

2.6

kg
kg

Overall mass

6.3

7.5

11

12

14

Air bearings

Air bearings

Air bearings

Air bearings

Air bearings

Drive typeLinear
motor,
ironless,
3-phaseLinear
motor,
ironless,
3-phaseLinear
motor,
ironless,
3-phaselinear
motor,
ironless,
3-phaseLinear
motor,
ironless,
3-phaseIntermediate circuit
voltage, effective

48, nom.
60, max.

48, nom.
60, max.

48, nom.
60, max.

48, nom.
60, max.

48, nom.
60, max.

VDC

Peak force

25

25

85

85

85

N

typ.

Nominal force

9.2

9.2

39

39

39

N

typ.

Force constant,effective

4.2

4.2

12.3

12.3

12.3

N/A

typ.

Resistancephase-phase

8.2

8.2

3.6

3.6

3.6

Ω

typ.

Inductivity
phase-phase

2.7

2.7

1.24

1.24

1.24

mH

typ.

Back EMF
phase-phase

4.2

4.2

10.1

10.1

10.1

V·s/m

max.

Internal,
no moving
cableInternal,
no movingcable

External,
movingcable

External,
movingcable

External,
movingcable

Guide type
Drive properties

Cabling

A-110.xxxA

A-110.xxxB

A-110.xxxC

Incremental linear encoder

Absolute Encoder

Incremental linear encoder

Sin/cos, 1 V peak-peak,
20 µm signal period

BiSS-CA/B quadrature, TTL

Sensor resolution

controller dependent

1 nm

50 nm

Bidirectional
repeatability

controller dependent±0.5 µm±0.5 µm

Accuracy,
uncompensated#

A-110.050: ±1 µm
A-110.100: ±1.5 µm
A-110.200: ±2 µm
A-110.300: ±3 µm
A-110.400: ±4 µm

A-110.050: ±1.5 µm
A-110.100: ±1.5 µm
A-110.200: ±1.5 µm
A-110.300: ±1.5 µm
A-110.400: ±1.5 µm

A-110.050: ±1 µm
A-110.100: ±1.5 µm
A-110.200: ±2 µm
A-110.300: ±3 µm
A-110.400: ±4 µm

Accuracy, with error
compensation#

A-110.050: ±1 µm
A-110.100: ±1 µm
A-110.200: ±1 µm
A-110.300: ±1.5 µm
A-110.400: ±1.5 µm

A-110.050: ±1 µm
A-110.100: ±1 µm
A-110.200: ±1 µm
A-110.300: ±1.5 µm
A-110.400: ±1.5 µm

A-110.050: ±1 µm
A-110.100: ±1 µm
A-110.200: ±1 µm
A-110.300: ±1.5 µm
A-110.400: ±1.5 µm

Integrated Sensor
Sensor signal** Can be limited by the payload, controller or drive.
*** Assumes payload CG is centered no more than 50 mm above the stage table. Stage is designed for horizontal operation only.
# 	Improved accuracy can be obtained with controller-based error compensation.
Accuracy values assume short-term time duration and do not consider the long-term effects of thermal drift on the stage.

MOTION|POSITIONING

13

A-110Linear Air Bearing
StagesOperatingpressure##
Air consumption

60 to 70 psi (415 to 485 kPa)
<1.0 SCFM (28 SLPM)

Air quality

Clean (filtered to 1.0 μm or better) – ISO 8573 1 Class 1
Oil free – ISO 8573 1 Class 1
Dry (–15 °C dew point) – ISO 8573 1 Class 3

Materials

Hardcoat aluminum, stainless steel fasteners## To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller.

A-110.050 and A-110.100, dimensions in mm

A-110.050
A-110.100

A

B

C

D

302
352

275
325

25
50

35
60

14

W W W. P I . W S

xxOrdering Example

Linear Air Bearing
Stages

A110 – xxx

Part# A-110.300A1 is a
Model:
A-110 (PIglide LC linear motorized air bearing stage)
Travel:300 mmEncoder:
A (20 µm/line sine output, 1 Vpp)
Motor Wiring: 1 (48 VDC)

Model
TravelEncoder
Motor

A-110.200, A-110.300 and A-110.400, dimensions in mm

A-110.200
A-110.300
A-110.400

A

B

C

D

E

475
575
675

400
500
600

200
250
300

102
152
202

105
155
205

15

MOTION|POSITIONING

Linear Air Bearing
StagesPIglide MB
Miniature Linear Air Bearing Stage
High Performance, Cleanroom Compatible, Customizablen S
 ize of the motion platform 57 mm × 83 mm
n L
 ow profile 38 mm
n T ravel ranges to 40 mm
n L
 oad capacity to 3.5 kgn N
 on-contact fully preloaded air bearingsn I ronless cog-free linear motorn I ntegral optical linear encodern R esolution to 20 nm
n V
 elocity to 0.5 m/secn A
 cceleration to 7.5 m/s²

The PIglide MB air bearing stage is linear servo motor driven
with fully preloaded air bearings and an integral opticallinear encoder. This stage offers ultra-precision in a miniature
package. The combination of non-contact components results
in a frictionless motion platform that offers the highest performance, quality, and life.
This stage is ideally suited for many high precision applications,such as metrology, photonics alignment, optics positioning,and scanning. The non-contact design also makes thesestages ideal for cleanroom applications. There are no moving
electrical cables to manage. The air bearing offers a locking
design for the ultimate in position stability.
Accessories and Optionsn

Air preparation kitsnSingle or multi-axis motion controllers and servo drivesn X
 Y stacks and custom configurations with precisionalignmentnCounterbalance options for vertical (Z) orientationsnCustomizations availablenGranite bases and vibration isolation systems

16

W W W. P I . W S

Linear Air Bearing
Stages

A-141.040E1
TravelDrive typeFeedback system
Intermediate circuit
voltage, effective

40 mmBrushless ironless linear servo motor, 3-phaseNon-contact optical linear encoder with travel limits and home index
48 VDC nominal, 80 VDC max

Force constant,effective

2.1 N/A

Nominal force

0.58 N

Peak force

2.3 N

Back EMF
phase-phase

0.7 V·s/m

Resistancephase-phase22.4 Ω

Inductivity
phase-phase

1.0 mH

Maximum velocity(1)
Maximum
acceleration (1)unloaded)

Up to 0.5 m/s
Up to 7.5 m/s²
3.5 kgLoad capacity in z (2)±2.0 µm

Accuracy (3)(uncompensated)±0.5 µm

Accuracy (3)(with error
compensation)±0.2 µm

Repeatability

20 nm

Encoderresolution (4)<1µm TIR over full travel

Straightness /flatness (5)<5 µrad over full travel

Pitch / yaw (5)0.6 kgOverall mass

0.3 kgMoving massInternal, non-moving

Cabling65±5 psi (450±35 kPa)

Operating pressure(6)<1.0 SCFM (28 SLPM)

Air consumption

Clean (filtered to 1.0 µm or better) – ISO 8573-1 Class 1;

Air quality

Clean (filtered to 1.0 µm or better) – ISO 8573-1 Class 1;
Oil-free – ISO 8573-1 Class 1;
Dry (–15 °C dew point) – ISO 8573-1 Class 3

Materials

Hardcoat aluminum, stainless steel fasteners(1) Maximum velocity and acceleration based on unloaded stage capability, may be limited by payload, controller, or drive performance.
(2) Assumes payload CG is centered no more than 50mm above the stage table. Stage is designed for horizontal operation only.
(3) 	Improved accuracy can be obtained with controller-based error compensation.
Accuracy values assume short-term time duration and do not consider the long-term effects of thermal drift on the stage.
(4) Encoder resolution depends on encoder option chosen. Resolution will impact repeatability specification.
(5) Dependent on the flatness of the surface to which the stage is mounted.
(6) To protect stage from damage, an under-pressure air sensor tied to the controller E-stop input is recommended.

MOTION|POSITIONING

17

Linear Air Bearing
Stages

A-141.040, dimensions in mm

18

W W W. P I . W S

Linear Air Bearing
Stages

A-131 PIglide VC Voice CoilLinear Stage with Air Bearing
High-Performance Miniature Nanopositioning Systemn I deal for scanning applications

or high-precision positioningn

Cleanroom compatiblenTravel ranges to 25 mmnLoad capacity to 100 Nn

Acceleration to 80 m/s²

Reference-class PIglide linear stage

Accessories and options

The PIglide stage with air bearing and voice coil drive offers
high velocity and acceleration in a compact package. The
contactless components of the motion platform ensure thehighest performance, quality, and lifetime.

n

Encodern

Bellows for additional protectionnPIglide® filter and air preparation kitsnSingle and multi-axis motion controllers

Voice coil drive technology
Voice coil drives consist of 2 essential components: A permanent magnet and a coil, which is located in the air gapof the magnetic field. When current flows through the coil,
it moves in the magnetic field of the permanent magnet.
The direction of motion depends on the polarity. Thanks
to their low weight and friction-free drive principle, voicecoil drives are particularly suitable for applications, which
require high dynamics and high velocities at limited travel
ranges. High scan frequencies and precision positioning arealso possible with these drives, because they are free of theeffects of hysteresis.

Fields of application
High-speed scanning, applications in manufacturing. Thanks
to the friction-free motion, no particles are formed, whichmakes PIglide® stages ideal for cleanroom applications.

19

MOTION|POSITIONING

A-131.025xxx

Unit

Tolerance

Linear Air Bearing
StagesMotion andpositioning
Active axes

X

Travel range

25

mm

Pitch*

10

µrad

max.

Yaw*

10

µrad

max.

±0.125µm

max.

Velocity, unloaded**

1

m/s

max.

Acceleration,
unloaded**

80

m/s²

max.

Load capacity in z***

100

N

max.

Moved mass

0.85

kg

3.6

kg

Straightness /flatness*

Mechanicalproperties

Overall mass
Guide typeAir bearing

Drive properties
Drive typeIntermediate circuit
voltage, effective

Brushless voice coil drive, ironless, 1 phase48, nominal
80, max.

V DC

Peak force

70.4

N

typ.

Nominal force

22.3

N

typ.

Force constant,effective

6.9

N/A

typ.

Resistance

2.7

Ω

typ.

Inductivity (at 1000
Hz)

1.4

mH

typ.

Back EMF

6.9

V·s/m

Nominal power

28

W

Cabling

Integrated sensor

A-131.025A1x

A-131.025D1x

A-131.025F1x

Incremental linear encoder

Incremental linear encoder

Incremental linear encoder

Sin/cos, 1 V peak-peak, 20 µm
signal period

A/B quadrature, TTL

A/B quadrature, TTL

Controller dependent

100 nm

500 nmBidirectional
repeatability±0.1 µm±0.1 µm±0.1 µm

Accuracy##

0.2 µm

0.2 µm

0.2 µmReferencepoint switch

Home index

Home index

Home index±1 encoder step

±1 encoder step

±1 encoder step

Sensor signal
Sensor resolution#

Reference pointswitch repeatability

A-131
Operatingpressure###Air consumption

20

*
**
***
#
##
###

max.

Internal, no moving cable75 to 85 psi (520 to 585 kPa)
<1.0 SCFM (28 SLPM)

Air quality

Clean (filtered to 1.0 μm or better) – ISO 8573 1 Class 1
Oil free – ISO 8573 1 Class 1
Dry (–15 °C dew point) – ISO 8573 1 Class 3

Materials

Hardcoat aluminum, stainless steel fasteners

Dependent on the flatness of the surface, on which the stage is mounted.
Can be limited by the payload, controller or drive.
Assumes that the center of gravity is centered no more than 50 mm from the motion platform.
Alternative resolutions on request. Higher resolutions can limit the velocity.
Improved accuracy can be obtained with controller-based error compensation.
To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller.

W W W. P I . W S

Linear Air Bearing
Stages

A-131.025xx, dimensions in mm

A-131.025xxB, dimensions in mm

21

MOTION|POSITIONING

A-311 PIglide IS
Planar Scanner with Air Bearing

XY Stages
with Air Bearings

High-Performance, Compact XY Nanopositioning Systemn I deal for scanning applications

or high-precision positioningn C leanroom compatiblen T ravel ranges to 200 mm × 200 mm
n L
 oad capacity to 147 N
n L
 ow profilen R esolution to 1 nm

PIglide reference-class XY positioning system
The high-precision PIglide IS XY planar scanner with air bearing has a flat design and is an alternative to the stacked
XY stages. The efficient, compact design saves space inmachines with limited installation space.
PIMag® magnetic direct drive
3-phase magnetic direct drives doe not use mechanical components in the drivetrain, they transmit the drive force tothe motion platform directly and without friction. The drives
reach high velocities and accelerations. Ironless motors are
particularly suitable for positioning tasks with the highest
demands on precision because there is no undesirable interaction with the permanent magnets. This allows smoothrunning even at the lowest velocities and at the same time,
there is no vibration at high velocities. Nonlinearity in control
behavior is avoided and any position can be controlled easily.
The drive force can be set freely.

Operation with digital controllers from leading manufacturers
offers advanced control algorithms for improving the dynamics and error compensation.
Accessories and Optionsn

EncodernPIglide filter and air preparation kit

nMulti-axis motion controller and servo drivesnMachine basesn B ase plates made of granite and systems for reducing

vibration
Fields of application
PIglide positioning systems are ideally suited for high-precision applications, such as inspection systems, laser marking,microscopy or scanning.

22

W W W. P I . W S

A-311.Dxx

A-311.Axx

A-311.Bxx

A-311.Cxx

Unit

Tolerance

Travel range

50 × 50

100 × 100

150 × 150

200 × 200mm

Pitch*

20

30

40

50

µrad

max.

Yaw*

5

10

15

20

µrad

max.

±0.25

±0.25

±0.5

±0.5

µm

max.

Straightness per 10mm travel range*

±10

±10

±10

±10

nm

max.

Straightness*

Flatness*

±0.5

±0.5

±1

±1

µm

max.

Flatness per 10 mmtravel range*

±10

±10

±10

±10

nm

max.

XY orthogonality

25

25

25

25

µrad

max.

Velocity, unloaded**

2

2

2

2

m/s

max.

Acceleration of
the upper axis,
unloaded**

27.5

27.5

27.5

27.5

m/s²

max.

Acceleration of
the lower axis,
unloaded**

15

13

11

10

m/s²

max.

max.

XY Stages
with Air Bearings

Motion andpositioning

Mechanicalproperties
Load capacity in z***

147

147

147

147

N

Moved mass,
upper axis

3

3

3

3

kg

Moved mass,
lower axis

5.5

6.5

7.5

8.5

kg

Overall mass

14.5

18.5

22.5

27.5

kg

Air bearing

Air bearing

Air bearing

Air bearing

Linear motor,
ironless, 3-phase

Linear motor,
ironless, 3-phase

Linear motor,
ironless, 3-phase

Linear motor,
ironless, 3-phase48, nominal 80,
max.

48, nominal 80,
max.

48, nominal 80,
max.

48, nominal 80,
max.

VDC

Guide type
Drive properties
Drive typeIntermediate circuit
voltage, effective
Peak force

85

85

85

85

N

typ.

Nominal force

39

39

39

39

N

typ.

Force constant,effective

12.3

12.3

12.3

12.3

N/A

typ.

Resistancephase-phase

3.6

3.6

3.6

3.6

Ω

Inductivity
phase-phase

1.24

1.24

1.24

1.24

mH

Back EMF
phase-phase

10.1

10.1

10.1

10.1

V·s/m

External,
movabledrag chain

External,
movabledrag chain

External,
movabledrag chain

External,
movabledrag chain

Cablingmax.

A-311.xCx
Operatingpressure##
Air consumption

60 to 70 psi (415 to 485 kPa)
<2 SCFM (56 SLPM)

Air quality

Clean (filtered to 1.0 μm or better) – ISO 8573 1 Class 1
Oil free – ISO 8573 1 Class 1
Dry (–15 °C dew point) – ISO 8573 1 Class 3

Materials

Hardcoat aluminum, with stainless steel fasteners*
Dependent on the flatness of the surface, on which the stage is mounted.
** Can be limited by the payload, controller or drive.
*** Assumes payload CG is centered no more than 50 mm above the stage table. Stage is designed for horizontal operation only.
## To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller.

MOTION|POSITIONING

23

Integrated sensor
Sensor signal
Sensor resolution
Bidirectional
repeatability

A-311.xBx

A-311.xCx

Incremental linear encoder

Absolute encoder

Incremental linear encoder

Sin/cos, 1 V peak-peak, 20 µm
signal period

BiSS-CA/B quadrature, TTL

Controller dependent

1 nm

50 nm

Controller dependent±0.05 µm

±0.05 µm

A-311.Dxx: ±1 µm
A-311.Axx: ±1.5 µm
A-311.Bxx: ±2 µm
A-311.Cxx: ±2.5 µm

A-311.Axx: ±1.5 µm
A-311.Axx: ±1.5 µm
A-311.Axx: ±1.5 µm
A-311.Axx: ±1.5 µm

A-311.Dxx: ±1 µm
A-311.Axx: ±1.5 µm
A-311.Bxx: ±2 µm
A-311.Cxx: ±2.5 µm

Accuracy, with error
compensation#±0.5 µm±0.5 µm±0.5 µm

Reference pointswitch repeatability±1 encoder step

±1 encoder step

±1 encoder step

Accuracy,
uncompensated#
XY Stages
with Air Bearings

A-311.xAx# 	Improved accuracy can be obtained with controller-based error compensation.
Accuracy values assume short-term time duration and do not consider the long-term effects of thermal drift on the stage.

A-311.xxx, dimensions in mm

A-311.Dxx
A-311.Axx
A-311.Bxx
A-311.Cxx

A

B

C

D

E

F

300
350
400
450

232
282
332
382

100
150
200
250

275
325
375
425

25
50
75
100

30
55
80
105

24

W W W. P I . W S

A-322 PIglide HS
Planar Scanner with Air Bearing

XY Stages
with Air Bearings

XY Positioning System with 1 nm Resolutionn I deal for scanning applications or

high-precision positioningn

Clean room compatiblen T ravel ranges to 500 mm × 1000 mm

PIglide® reference-class XY positioning system
The PIglide® HS planar scanner has magnetic linear motors,
vacuum preload and absolute encoders: Contact- and friction-free motion for the highest accuracy and reliability.

n

Load capacity to 245 NnResolution to 1 nm

nVelocity up to 2 mm/s

Operation with digital controllers from leading manufacturers offers advanced control algorithms for improving the
dynamics and error compensation.
Accessories and options

Absolute encodern

PIglide® filter and air preparation kits

Absolute encoders supply explicit position informationthat enables immediate determination of the position. Thismeans that referencing is not required during switch-on,
which increases efficiency and safety during operation.

nAdditional axesnMachine bases

PIMag magnetic direct drive®

The stage has an ironless magnetic direct drive, which makes
high velocities and acceleration possible. At the same time,sine-commutated control makes high positioning resolution
possible because the drive is friction free. The drive force
can be set freely.
The positioning system was designed to both maximize thethroughput and ensure the highest precision. The flexible
coupling of the bridge axis to the gantry axis allows lateraldecoupling without sacrificing the stiffness of the system.

n B ase plates made of granite and systems

for reducing vibration
Fields of application
PIglide® positioning systems are ideally suited for many highprecision applications, such as metrology, photonics, andprecision scanning as well as in semiconductor or flat panel
display manufacturing.
Thanks to the friction-free motion, no particles are formed,
which makes PIglide® stages ideal for cleanroom applications.

25

MOTION|POSITIONING

A-322.Axx

A-322.Bxx

A-322.Cxx

A-322.Dxx

Unit

Tolerance

Motion andpositioning
Active axes

XY Stages
with Air Bearings

X, Y

X, Y

X, Y

X, Y

Travel range (bridge
axis × gantry axis)

350 × 350

350 × 500

500 × 500

500 × 1000

Integrated sensors

Absolute
Encoders

Absolute
Encoders

Absolute
Encoders

Absolute
Encoders

Sensor resolution

mm

1

1

1

1

nm

Bidirectional
repeatability

±0.08

±0.08

±0.08

±0.08

µm

max.

Accuracy*

±0.5

±0.5

±0.5

±0.5

µm

max.

Pitch

15

20

30

40

µrad

max.

Yaw*

5

5

7

7

µrad

max.

Straightness*

±0.5

±0.5

±1

±1

µm

max.

Straightness per
10 mm travel range*

±10

±10

±10

±10

nm

max.

Flatness

±0.5

±1

±1.5

±2.5

µm

max.

Flatness per 10 mmtravel range

±10

±10

±10

±10

nm

max.

XY orthogonality

25

25

25

25

µrad

max.

Velocity, unloaded**

2

2

2

2

m/s

max.

Acceleration, bridgeaxis, unloaded**

20

20

20

20

m/s²

max.

Acceleration, gantry
axis, unloaded**

15

15

12

12

m/s²

max.

Load capacity in z***

245

245

245

245

N

max.

Moved mass,
bridge axis

14

14

14

14

kg

Moved mass,gantry axis

40

40

43

43

kg

Overall mass

610

700

1075

1525

kg

Air bearings

Air bearings

Air bearings

Air bearings

Linear motor,
ironless, 3-phase,1 × to bridge axis,
2 × to gantry axis

Linear motor,
ironless, 3-phase,1 × to bridge axis,
2 × to gantry axis

Linear motor,
ironless, 3-phase,1 × to bridge axis,
2 × to gantry axis

Linear motor,
ironless, 3-phase,1 × to bridge axis,
2 × to gantry axis

48, nominal
80, max.

48, nominal
80, max.

48, nominal
80, max.

48, nominal
80, max.

VDC

Guide type
Drive properties
Drive typeIntermediate circuit
voltage, effective
Peak force#

298

298

298

298

N

typ.

Nominal force#

87

87

87

87

N

typ.

Force constant,effective#

19.9

19.9

19.9

19.9

N/A

typ.

Resistancephase-phase#

3.6

3.6

3.6

3.6

Ω

Inductivity
phase-phase#

1.2

1.2

1.2

1.2

mH

Back EMF
phase-phase#

16

16

16

16

V·s/m

moved ribbon
cable, cleanroom
compatible

moved ribbon
cable, cleanroom
compatible

moved ribbon
cable, cleanroom
compatible

moved ribbon
cable, cleanroom
compatible

Cabling*	Improved accuracy can be obtained with controller-based error compensation. Stage must be ordered with controller.
Accuracy values assume short-term time duration and do not consider the long-term effects of thermal drift on the stage.
**	Can be limited by the insulating system payload, controller or drive.
***	Assumes payload CG is centered no more than 50 mm above the stage table.
#	Specifications for the drive apply per motor. Two motors are located at the gantry axis.

26

All specifications apply per axis, if not otherwise described.

W W W. P I . W S

max.

A-322Air consumption
with external
vacuum supply<2 SCFM (56 SLPM)

Air consumption
with internal
vacuum supply<3.2 SCFM (100 SLPM)

Vacuum##80 psi (552 kPa)10.8 psi (74.7 kPa), <0.5 SCFM (14 SLPM)

Air quality

Clean (filtered to 1.0 μm or better) – ISO 8573 1 Class 1
Oilfree – ISO 8573 1 Class 1
Dry (–15 °C dew point) – ISO 8573 1 Class 3

Materials

Hardcoat aluminum and nickel-plated steel with stainless steel mounting material, granite base

XY Stages
with Air Bearings

Operatingpressure ##To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller.

A-322.xxx, dimensions in mm

27

MOTION|POSITIONING

A-62x PIglide RM
Rotation Stage with Air Bearing
Friction-Free, Ideal for Indexing, Positioning, Scanning, Measuring Technology

Cleanroom compatiblenTable diameters from 50 mm to 300 mmn

Load capacity up to 4170 NnEccentricity and flatness <200 nmn

Can be mounted vertically or horizontally

Rotation Stages
with Air Bearingsn

PIglide motorized rotation stage

Accessories and options

The PIglide RM series of motorized rotation stages are designed
for accuracy, precision, high stiffness, and ease of use, andcan be mounted in any orientation.

n

Encodern

Optional tip/tilt platformn

Custom mounting flangesnVacuum feedthroughn

Slip ringsn

PIglide filter and air preparation kit

Various options can be combined to create a solution ideal
for point-to-point indexing or constant velocity scanning.
The RM stages offer superior runout, flatness, and wobble
performance. Because they are friction free and require no
maintenance or lubrication, they are ideal for use in cleanrooms.

n S
 ingle or multi-axis motion controllers and servo drivesn B ase plates made of granite and systems for reducing

vibration3-phase torque motornBrushlessFields of applicationnSlotlessn

Low cogging torque

Optical adjustment, metrology, inspection systems, calibration, scanning.

Absolute encoder (optional)
Absolute encoders supply explicit position informationthat enables immediate determination of the position. Thismeans that referencing is not required during switch-on,
which increases efficiency and safety during operation.
28

W W W. P I . W S

A-621.025

A-623.025

A-623.050

A-624.050

A-627.075

Unit

Tolerance

Unlimited,> 360°

Unlimited,> 360°

Unlimited,> 360°

Unlimited,> 360°

Unlimited,> 360°

Table Diameter

50

100

100

150

300

mm

Bearing
journal length

25

25

50

50

75

mm

Eccentricity*

300

200

200

100

75

nm

max.

Flatness*

150

100

100

75

50

nm

max.

Wobble*

5

3

3

2

1

μrad

max.

Motion andpositioning
Travel range

Mechanicalproperties
134

536

536

1206

4244

N

max.

57

115

229

344

1203

N

max.

Load torque MX,Y

0.57

1.7

4.52

22.6

141.3

N·m

max.

Axial stiffness

26

96

96

210

788

N/µm

Radial stiffness

8

18

35

64

204

N/µm

Moment of inertia

125

1485

1530

8790

210850kg·mm²

Moved mass

0.4

1.2

1.4

3.2

21.5

kg

Overall mass

1.2

3.1

4.5

8.6

50

kg

Air bearing

Air bearing

Air bearing

Air bearing

Air bearing

Torque motor,
3-phase,brushless,ironless,slotless

Torque motor,
3-phase,brushless,ironless,slotless

Torque motor,
3-phase,brushless,ironless,slotless

Torque motor,
3-phase,brushless,ironless,slotless

Torque motor,
3-phase,brushless,ironless,slotless

48, nominal
80, max.

48, nominal
80, max.

48, nominal
80, max.

48, nominal
80, max.

48, nominal
80, max.

V DC

Guide type

Rotation Stages
with Air Bearings

Load capacity, axial
Load capacity, radial

Drive properties

Drive typeIntermediate circuit
voltage, effective
Peak torque

0.21

2.1

2.1

4.71

8.46

N·m

typ.

Nominal torque

0.07

0.7

0.7

1.57

2.82

N·m

typ.

Force constant,effective

0.03

0.26

0.26

0.59

0.61

N·m/A

typ.

Resistancephase-phase

2.7

4.2

4.2

6.7

4.5

Ω

Inductivity
phase-phase

0.1

0.4

0.4

0.9

0.6

mH

Back EMF
phase-phase

4.1

31.8

31.8

71

74

V/kRPMmax.

A-62x
Operatingpressure###Air consumption
Air quality
Materials####75 to 85 psi (515 to 585 kPa)
<2 SCFM (56 SLPM)
Clean (filtered to 1.0 μm or better) – ISO 8573 1 Class 1
Oil free – ISO 8573 1 Class 1
Dry (–15 °C dew point) – ISO 8573 1 Class 3
Hardcoat aluminum, stainless steel fasteners*	Depending on the quality of the underlying surface, the payload, orientation, and forces that act on the stage from the outside.
Please contact PI for application-specific parameters. The specified values are static (no rotary motion during measuring) and without load.
#
Uses 400-fold interpolation. Alternative digital encoder resolutions on request. Please contact PI for a quote.
### To protect the stage against damage, it is recommended to connect an air pressure sensor to the Motion-Stop input of the controller.
#### Customer-specific materials such as rust-free steel on request. Please contact PI for a quote.

MOTION|POSITIONING

29

A-62x.xxxAx

A-62x.xxxBx

A-62x.xxxCx

Incremental angle
measuring system

Absolute-measuring angle
measuring system

Incremental angle measuringsystemSin/cos, 1 V peak-peak

BiSS-CA/B quadrature, TTL

A-621: 8192
A-623: 15744
A-624: 23600
A-627: 47200–

A-621: 8192
A-623: 15744
A-624: 23600
A-627: 47200

Velocity**

A-621: 2500 rpm max.
A-623: 1200 rpm max.
A-624: 600 rpm max.
A-627: 500 rpm max.

A-621: 2500 rpm max.
A-623: 1200 rpm max.
A-624: 600 rpm max.
A-627: 500 rpm max.

A-621: 550 rpm max.***A-623: 300 rpm max.***A-624: 175 rpm max.***A-627: 75 rpm max.***Sensor resolution

A-621: 0.19 µrad****A-623: 0.1 µrad****A-624: 0.06 µrad****A-627: 0.03 µrad****A-621: 0.0015 µrad
A-623: 0.0015 µrad
A-624: 0.0015 µrad
A-627: 0.0015 µrad

A-621: 1.94 µrad#
A-623: 1.02 µrad#
A-624: 0.68 µrad#
A-627: 0.33 µrad#

Bidirectional
repeatability±4 µrad±4 µrad±4 µradAccuracy, with error
compensation##±8 µrad±8 µrad±8 µrad

1 / revolution, differential pulse
over one sensor signal period,
1 V peak-peak–

1 / revolution, one countover one step of the encoder,synchronized to output signal

Integrated sensor
Sensor signal
Lines/revolution

Rotation Stages
with Air Bearings

Reference pointswitch**Can be limited by imbalance of the payload or the controller and the drive.
*** Assumes a sampling rate of 50 MHz.
**** Assumes 4096-fold interpolation. Contact PI for the use of other factors.
##	The specified values are based on error compensation controlled by the controller. The stage must be ordered with a controller from PI
to reach these values. Accuracy values assume short-term time duration and do not consider the long-term effects of thermal drift on the stage.

A-621.025xx, dimensions in mm

30

W W W. P I . W SRotation Stages
with Air Bearings

A-623.xxxxx, dimensions in mm
A-623.025xx: A=75 mm; B=90 mm
A-623.050xx: A=100 mm; B=115 mm

A-624.050xx, dimensions in mm

31

MOTION|POSITIONING

Rotation Stages
with Air Bearings

A-627.075xx, dimensions in mm

32

W W W. P I . W S

A-10x PIglide RB Linear Air Bearing Module

Air Bearings

Friction Free, Ideal for Positioning, Scanning, Metrology

Linear air bearings of the PIglide RB series are exactly rightfor applications that need smooth, precise, linear motion.
The air bearing modules replace ball or crossed roller guides
and are easy to integrate. They offer improved straightness,angular deviation, and repeatability compared to stage units
with ball bearings, especially for travel ranges longer than
100 mm.

n I deal for scanning applications or high-resolution

positioningn C leanroom compatiblen S
 ize of the motion platform to 300 mm × 300 mm
n T ravel ranges to 1 mn L oad capacity to 775 kg
n S
 traightness / flatness to 0.5 μm per 25 mmn

Because air bearings are basically friction free, they workwithout stiction on approach or during operation, even undermaximum load. Air bearings work without making contact
and with purified air, and are virtually maintenance and wear
free.

Pitch / roll / yaw to 1.2 µrad per 25 mm

Accessories and optionsn

Air preparation kit

nMounting Feetn

Custom configurations on requestnSeveral motion platforms on one guidenConstructions with moving guide

33

MOTION|POSITIONING

Size of the motion
platform / mm × mm

Travel range / mm

Vertical load
capacity* / N

Lateral load
capacity* / N

A-101

50 × 50

50 to 200

130

75

A-102

50 × 100

50 to 300

260

260

A-103

75 × 75

50 to 300

350

195

A-104

75 × 115

50 to 300

540

540

A-105

100 × 100

50 to 300

630

370

A-106

100 × 150

50 to 600

950

950

A-107

150 × 150

50 to 750

1580

790

A-108

200 × 200

50 to 1000

2950

1475

A-109

300 × 300

50 to 1000

7600

2210

Travel ranges
to 300 mm

Travel ranges
to 600 mm

Travel ranges
to 1000 mm

Lateral load
capacity* / N

Straightness /flatness**±1.25 μm±2.5 μm±5 μm

75Straightness /flatness, per 25 mmtravel range**±0.25 μm±0.25 μm±0.25 μm

260

Position stability**±0.05 μm

±0.05 μm

±0.05 μm

195

Pitch / yaw,per 25 mmtravel range**

1.2 µrad1.2 µrad1.2 µrad540

Pitch / yaw, overall**

10 µrad20 µrad30 µrad370

Air Bearings

A-10x.xxx

34

Operating pressure

80 psi (550 kPa) nominal

Air consumption<1.0 SCFM (28 SLPM)

Air quality

Clean (filtered to 1.0 μm or better) – ISO 8573 1 Class 1
Oil free – ISO 8573 1 Class 1
Dry (–15 °C dew point) – ISO 8573 1 Class 3

Materials

Hardcoat aluminum, stainless steel fasteners*	The specified load capacities assume an operating pressure of 80 psi (550 kPa).
For an alternative operating pressure, contact PI for determining other load capacities.
**	Precision specifications depend-ing on load, orientation, and external forces on the bearing. Contact PI for applicationspecific parameters.
Ask about custom designs!

W W W. P I . W S

A-101
A-102
A-103
A-104
A-105
A-106
A-107
A-108
A-109

A

B

C

D

E

F

G

H

J

K

L

M

N

P

Q

R

S

T

U

V

W

X

50
100
75
115
100
150
150
200
300

50
50
75
75
100
100
150
200
300

35
45
55
75
75
100
100
130
140

15
25
25
45
35
60
50
70
70

25
25
45
45
60
60
100
140
240

5
5
7.5
7.5
10
10
10
10
10

15
15
30
30
40
40
75
100
200

Cl
CL
12.5
12.5
20
20
50
50
100

4x M3 C’BORE
4x M3 C’BORE
4x M5 C’BORE
4x M5 C’BORE
4x M6 C’BORE
4x M6 C’BORE
6x M6 C’BORE
6x M6 C’BORE
6x M6 C’BORE

2x M3
2x M3
2x M5
2x M5
2x M6
2x M6
4x M6
4x M6
4x M6

80
130
115
155
150
200
200
250
350

15
15
35
50
50
50
50
50
50

40
40
N/A
N/A
N/A
N/A
N/A
N/A
N/A

N/A
60
N/A
N/A
N/A
110
110
150
150

N/A
N/A
N/A
N/A
N/A
N/A
N/A
N/A
250

40
40
60
60
80
80
125
170
270

6x M3
10x M3
4x M5
4x M5
4x M6
8x M6
8x M6
8x M6
12x M6

12
12
14
14
14
14
14
14
14

21
46
37.5
57.5
50
75
75
100
100

30
40
47.5
67.5
37.5
50
50
65
65

10
10
15
15
20
20
20
20
20

4 (5/32”)
6 (1/4”)6 (1/4”)6 (1/4”)6 (1/4”)6 (1/4”)6 (1/4”)6 (1/4”)6 (1/4”)

Air Bearings

A-10x.xxx, dimensions in mm

A-10x.MNT Mounting Feet
For Mounting the Air Bearing Modules of the A-10x SeriesnHardcoat aluminumn M atched exactly to the respective air bearing module

Compatible with

Width/mm

Overall mass (one set)/kg

A-101.MNT

A-101.xxx

10

0.03

A-102.MNT

A-102.xxx

10

0.03

A-103.MNT

A-103.xxx

15

0.08

A-104.MNT

A-104.xxx

15

0.08

A-105.MNT

A-105.xxx

20

0.13

A-106.MNT

A-106.xxx

20

0.13

A-107.MNT

A-107.xxx

20

0.27

A-108.MNT

A-108.xxx

20

0.46

A-109.MNT

A-109.xxx

20

0.94

MOTION|POSITIONING

35

A-41x PIglide FPC:
Flat, Circular Air Bearing Modules

Air Bearings

Friction-free, modular air bearingsn D iameters from 25 mm to 300 mm
n L
 oad capacity to 15500 Nn S
 tiffness to 860 kN/mm
n M
 ounting hardware, customizations,and accessories available

The PIglide Flat Pad Circular air bearing series is suitable
for applications that require friction-free, accurate linear orplanar motion. The modular concept of these air bearings
allows the user to build their own motion system. Several
bearings can be combined to increase the load capacity or
to create multi-axis motion platforms.
Application fields
For the set-up of positioning, scanning, metrology, inspection and calibration systems.
Thanks to the friction-free motion, no particles are formed,
which makes PIglide stages ideal for cleanroom applications.

36

W W W. P I . W S

Part #

Diameter/mm

Ball interface
diameter/mm

Loadcapacity/N

Stiffness/
N/µm

Air consumption/l/h (SCFH)

Mass/g

A-411.025

25

13

88

17.5

60 (2)

16

A-411.040

40

13

220

28.0

60 (2)

42

A-411.050

50

13

330

52.5

85 (3)

66

A-411.065

65

13

660

78.8

115 (4)171

A-411.080

80

13

1010

111

170 (6)

259

A-411.100

100

20

1710

175

170 (6)505

Air supply
Operating pressure
Air quality

80 psi (550 kPa) nominal
Clean (filtered to 1.0 μm or better) – ISO 8573 1 Class 1
Oil free – ISO 8573 1 Class 1
Dry (–15 °C dew point) – ISO 8573 1 Class 3<1 µm/300 mm

Nominal fly-height

10-15 µm

Materials
Recommended
guideway materials
Air bearing type

Air Bearings

Miscellaneous
Guideway surface
flatness

Hardcoat aluminum, stainless steel fasteners
Guideways are supplied by the customer.
Granite, hardcoat aluminum, stainless steel, ceramics,
nickel-plated steel, nickel-plated cast iron
Discrete orifice

Mounting Hardware(sold separately)
Description

Ball interface diameter

A-412.013SPart #

Threaded ball stud assembly

13

A-412.013N

Mounting nut

13

A-412.013P

Retaining plate

13

A-412.020S

Threaded ball stud assembly20

A-412.020N

Mounting nut

20

A-412.020P

Retaining plate

20

The loads listed assume a supply pressure of 550 kPa (80 psi). Please contact PI if other pressures are required.

MOTION|POSITIONING

37

Air Bearings

A-110.200, A-110.300 and A-110.400, dimensions in mm

A-411.025
A-411.040
A-411.050
A-411.065
A-411.080
A-411.100
A-411.125
A-411.150
A-411.200
A-411.300

A

B

C

D

E

F

25
40
50
65
80
100
125
150
200
300

13
13
13
20
20
25
35
35
66
66

13
13
13
13
13
20
20
20
20
20

N/A
21.6
21.6
21.6
21.6
31.6
31.6
31.6
31.6
31.6

6.4
7
7
8
8
9
9
9
9
9

1.5
1
1
1
4.5
6.4
6.4
6.4
25
25

38

W W W. P I . W S

Air Bearings

Mounting hardware dimensions: 13 mm ball interface diameter

Mounting hardware dimensions: 20 mm ball interface diameter

39

MOTION|POSITIONING

A-60x PIglide RT Rotary Air Bearing Module
Frictonless, Non-motorizedn T able diameters from 50 mm

to 300 mm
n L oad capacity to 425 kg
Air Bearingsn E
 ccentricity / flatness <200 nm
n C
 an be mounted vertically or

horizontally

The PIglide RT series of nonmotorized passive rotary air bearings are designed for accuracy, precision, high stiffness, andease of use. They can be used in any orientation and areeasy to integrate with motors and encoders for complete
positioning solutions.
The bearings of the RT series offer superior eccentricity, flatness, and wobble performance. Because they are completely
friction-free, they exhibit no breakaway torque and no frictional resistance during operation. They are ideal for use incleanrooms, require no maintenance or lubrication, and haveunlimited lifetime.

Accessories and optionsn E
 ncoder for precise acquisition of stage angle during

manual operationn M ounting basen P Iglide filter and air preparation kitsn C ustom mounting flanges and square housings

Application fields
Optical alignment, metrology, parts inspection,
calibration, scanning, torque measurement.
Thanks to the friction-free motion, no particles areformed, which makes PIglide stages ideal forcleanroom applications.

40

W W W. P I . W S

Table diameter/mm

Journal length/mm

Load capacity*
axial/radial/N

Permissible tilt
torque*/N·m

Stiffness axial/
radial/N/µm

A-601.02550

25

134 / 57

0.57

26 / 8A-602.03875

38

299 / 132

1.13

57 / 22

A-603.025100

25

536 / 115

1.70

96 / 18

A-603.050

100

50536 / 229

4.52

96 / 35

A-604.050

150

501206 / 344

22.6

210 / 64

A-604.090

150

901206 / 605

36.7

210 / 113

A-605.065

200

652144 / 577

39.6

385 / 110

A-605.100

200

100

2144 / 917

67.8

385 / 175

A-607.075300

754244 / 1203

141.3

788 / 204

A-607.175

300

175

4244 / 2789

282.5

788 / 475

Performance
specifications

Eccentricity**/µm

Flatness**/µm

Wobble**/
µrad

Max.
velocity***/rpm

Moment ofinertia/kg·mm²

Rotating
mass/kg

Overall
mass/kg

A-601.025

300

150

5

3000

35

0.15

0.4

A-602.038

300

150

5

3000

231

0.4

1.2

A-603.025

200

100

3

3000

705

0.7

1.5

A-603.050

200

100

3

3000

750

0.8

2.5

A-604.050

100

75

2

3000

4715

2.1

5.4

A-604.090

100

75

2

3000

5050

2.6

8.2

A-605.065

100

75

1,5

2000

17900

4.6

11.6

A-605.100

100

75

1,5

2000

18800

5.3

16.3

A-607.075

75

50

1

1000

18190019.4

38.1

A-607.175

75

50

1

1000

20670026.0

59.0

Optional
encoders

Sensor signal

Sensorresolution/µrad

Max. velocity/
rpm

Reference point switch

A-601.xxxH

A/B quadrature, differential,
RS-422, 4 MHz

192

2500

1 / revolution, one count over one
step of the encoder, synchronized to
output signal

A-602.xxxH

A/B quadrature, differential,
RS-422, max. 4 MHz

133

2000

1 / revolution, one count over one
step of the encoder, synchronized to
output signal

A-603.xxxH

A/B quadrature, differential,
RS-422, max. 4 MHz

100

1500

1 / revolution, one count over one
step of the encoder, synchronized to
output signal

A-604xxxH

A/B quadrature, differential,
RS-422, max. 4 MHz

66.4

1000

1 / revolution, one count over one
step of the encoder, synchronized to
output signal

A-605.xxxH

A/B quadrature, differential,
RS-422, max. 4 MHz

50

800

1 / revolution, one count over one
step of the encoder, synchronized to
output signal

A-607.xxxH

A/B quadrature, differential,
RS-422, max. 4 MHz

33.5

500

1 / revolution, one count over one
step of the encoder, synchronized to
output signal

Air Bearings

Size and loads

A-60x
OperatingpressureAir
consumption

75 to 85 psi (515 to 585 kPa)
<2.0 SCFM (57 SLPM)

Air quality

Clean (filtered to 1.0 μm or better) – ISO 8573 1 Class 1
Oil free – ISO 8573 1 Class 1
Dry (–15 °C dew point) – ISO 8573 1 Class 3

Materials#

Hardcoat aluminum, stainless steel fasteners***

Loads listed assume supply pressure of 80 psi. Please contact PI if other pressures are required.
Precision specifications are dependent on quality of mounting surfaces, payload, orientation, and external forces on the bearing.
For application-specific parameters, please contact PI. Values shown are static (no rotational velocity during measurement).
*** Velocity may be limited by the encoder option or payload imbalance. Please contact PI for further details.
#
Alternative stage surface materials such as stainless steel available. Please contact PI for a quote.

MOTION|POSITIONING

41

Air Bearings

A-60x.xxx, dimensions in mm

A-601.025
A-602.038
A-603.025
A-603.050
A-604.050
A-604.090
A-605.065
A-605.100
A-607.075
A-607.175

A

B

C

D

E

F

G

H

J

K

L

M

N

50
75
100
100
150
150
200
200
300
300

25
38
25
50
50
90
65
100
75
175

50
65
55
80
95
135
125
160
150
250

70
100
125
125
185
185
240
240
355
355

25
30
50
50
75
75
100
100
150
150

40
50
75
75
125
125
150
150
250
250

60
87.5
112.5
112.5
170
170
220
220
330
330

8
12.5
25
25
40
40
60
60
75
75

M3x0.5, 6 DEEP
M3x0.5, 6 DEEP
M4x0.7, 8 DEEP
M4x0.7, 8 DEEP
M5x0.8, 10 DEEP
M5x0.8, 10 DEEP
M6x1.0, 12 DEEP
M6x1.0, 12 DEEP
M6x1.0, 12 DEEP
M6x1.0, 12 DEEP3x M3 SHCS, 30 LG. MIN
3x M4 SHCS, 40 LG. MIN
3x MS SHCS, 30 LG. MIN
3x MS SHCS, 50 LG. MIN
4x M6 SHCS, 50 LG. MIN
4x M6 SHCS, 90 LG. MIN
6x M6 SHCS, 70 LG. MIN
6x M6 SHCS, 100 LG. MIN
6x MS SHCS, 80 LG. MIN
6x MS SHCS, 150 LG. MIN

3x M3x0.5, 6 DEEP3x M4x0.7, 8 DEEP
3x M5x0.8, 10 DEEP
3x M5x0.8, 10 DEEP4x M6x1 .0, 12 DEEP4x M6x1.0, 12 DEEP6x M6x1 .0, 12 DEEP6x M6x1 .0, 12 DEEP
6x M8x1.25, 16 DEEP
6x M8x1.25, 16 DEEP

6
9.5
6
12.5
12.5
22.5
16
23.5
17.3
58.5

30
30
30
30
68
68
5
5
5
5

42

W W W. P I . W S

Air Bearings

A-60x.xxxH and A-60x.xxxM, dimensions in mm

A-601.025 M or H
A-602.038 M or H
A-603.025 M or H
A-603.050 M or H
A-604.050 M or H
A-604.090 M or H
A-605.065 M or H
A-605.100 M or H
A-607.075 M or H
A-607 175 M or H

A

B

C

D

E

F

G

H

I

50
75
100
100
150
150
200
200
300
300

65
80
65
90
100
140
130
165
155
255

26.5
26.5
25
25
27.5
27.5
35
35
42.5
42.5

82
106
135
135
185
185
240
240
355
355

74
104
125
125
185
185
240
240
355
355

55
80
100
100
150
150
200
200
300
300

70
100
-

70
100
-

M3 SHCS, 25 LG. MIN
M4 SHCS, 30 LG. MIN
M5 SHCS, 25 LG. MIN
M5 SHCS, 25 LG. MIN
M5 SHCS, 30 LG. MIN
M5 SHCS. 30 LG. MIN
M6 SHCS, 35 LG. MIN
M6 SHCS, 35 LG. MIN
MB SHCS, 40 LG. MIN
MB SHCS, 40 LG MIN

43

MOTION|POSITIONING

A-65x PIglide HB: Hemispherical Air Bearing
Friction-free, ideal for rotary motion on three axes

Overview
The PIglide HB series with spherical air bearings makes
unique positioning and simulation applications possible
in the fields of research and industry. The bearings offer
excellent load capacity and stiffness, and at the same time,inherent friction-free motion on three rotational axes. The
spherical bearings, which are often used in research on
weightlessness in satellites, are also used in systems for
precision chip contacting and optical alignment. Due to theuse of spherical bearings at both ends of the drive screw
shaft, it is possible to build extremely stiff drive screws. This
arrangement allows precision alignment of the drive screw
shaft due to the motion of one spherical bearing relative tothe other.
Accessories and Options
Air Bearingsn A
 ir preparation kit
n C lean room compatiblen L ow inertian D iameter up to 300 mm
n R
 otatable in three

directionsn L oad capacity to 635 kg

n O perating pressureof 30 psi to 90 psi(207 kPa to 621 kPa)n I deal for satellite

control and simulationof weightlessnessn C ustom configurations on request

Related and compatible productsnAccessoriesnA-65x.PED Pedestaln T ip/tilt range to ±45°

Sphere diameter

A-110.200xx

A-110.300xx

A-110.400xx

Unit

Tolerance

A-651

50

±45

15

115

70

0.02

A-652

75

±45

35

235

216

0.14

A-653

100

±45

65

550

475

0.58

A-654

150

±45

160

1350

1475

4.21

A-655

200

±45

265

2500

3350

17.2

A-656

250

±45

405

4000

5525

46.3

A-657

300

±45

635

6500

8100

103

OperatingpressureAir
consumption

44

80 psi (550 kPa) nominal, 90 psi (621 kPa) maximum<1.0 SCFM (28 SLPM)

Air quality

Clean (filtered to 1.0 μm or better) – ISO 8573 1 Class 1
Oil-free –­ISO 8573 1 Class 1
Dry (–15 °C dew point) – ISO 8573 1 Class 3

Materials

Hardcoat aluminum, stainless steel fasteners, walternative materials on request* 	The specified load capacities assume an operating pressure of 80 psi (550 kPa).
For an alternative operating pressure, contact PI for determining other load capacities.
** Other travel ranges on request.
*** Around the center of the sphere.

W W W. P I . W S

A-651
A-652
A-653
A-654
A-655
A-656
A-657

A

B

C

D

E

F

G

H

I

50
75
100
150
200
250
300

30
50
70
110
150
200
250

42
55
70
95
125
150
175

55
70
100
140
170
210
250

23
27
30
40
50
55
65

M3
M3
M4
M5
M5
M6
M6

38
60
85
125
175
225
275

M3
M3
M4
M5
M5
M6
M6

45
60
85
125
150
190
230

Air Bearings

A-65x.045, dimensions in mm

A-65x.PED Pedestal
Compatible with A-65x PIglide HB Hemispherical Air Bearingn M atching pedestal

A-65x.PED, dimensions in mm

for each A-65x model

45

MOTION|POSITIONING

A-81x PIglide Motion Controller
Multi-Axis Controller for Direct Drive Air Bearing Stages

n

1, 2, & 4 motion axesn F ully integrated closed-loop servo control,

amplifier module, and power suppliesn F
 or voice coils, DC motors, and 3-phase brushless

motorsn Q uiet PWM drivesn E
 ncoder inputs support sine/cosine and BiSS-C
n 1
 9” rack unit

Motion Control

n 5
 A average current / 10 A peak output current per axis

The A-81x motion controller series from PI offers a fully integrated electronics solution with controller, drives, and power
supplies in a compact 19-inch rack unit. They are designed
and optimized for PIglide air bearing tables that are equippedwith direct drive linear and rotation servo motors and highresolution encoders.
Standard options include inputs for incremental sine/cosine
and absolute encoders that use the BiSS-C data protocol.
Support for sine/cosine encoders has an integrated interpolation factor of 16384x. All controllers feature integrated
flash memory for stored motion programs and parameters.

Typical customizationsn A
 lternate packaging for OEM designsn I /O configurationsn P
 osition triggeringn V irtual encoder outputsn A
 dvanced Control Algorithmsn D ual-feedback servo loopsn A dditional axesn H
 igher power outputn L
 inear servo drives and power supplies

The A-81x controllers can run in standalone mode runningstored programs, or controlled via an external PC. A PC isrequired for programming and start-up. All software is supplied with the controller.
If the controller is purchased with a PIglide air bearing tableor positioning system, PI will perform the servo tuning, start-upof the controller, and error calibration and supplies a complete ready-to-use positioning system.
46

W W W. P I . W S

A-812.21x00

A-814.21x00

Number of axes

1

2

4

Controller type

Closed loop servo control (PID)with parameter changing during
operation

Closed loop servo control (PID)with parameter changing during
operation

Closed loop servo control (PID)with parameter changing during
operation

Servo-frequency
position control

10 kHz

10 kHz

10 kHzServo frequency
current control

20 kHz

20 kHz

20 kHzTrajectory profile
modes

Point-to-point, jog

Point-to-point, jog, S-curve,interpolated coordinatedmulti-axis

Point-to-point, jog, S-curve,interpolated coordinatedmulti-axis

Fan on the side, continuous
operation, constant speed

Fan on the side, continuous
operation, constant speed

Fan on the side, continuous
operation, constant speed

Cooling

PWM

PWM

PWM

Encoder options(factory configured)

Drive type

Incremental sine / cosine(1 Vp-p), Absolute, BiSS-C

Incremental sine / cosine(1 Vp-p), A/B quadrature (RS-422)
Absolute, BiSS-C

Incremental sine / cosine(1 Vp-p), A/B quadrature (RS-422)
Absolute, BiSS-C

Interpolation factor(Sine encoder
options)

Up to 16384x

Up to 16384x

Up to 16384x

60 V DC

60 V DC

60 V DC

Voice coil, DC motor, 3-phasebrushless servo motor withencoder-based sine commutation

Voice coil, DC motor, 3-phasebrushless servo motor withencoder-based sine commutation

Voice coil, DC motor, 3-phasebrushless servo motor withencoder-based sine commutation

Output current(per axis)

5 A continuous operation,
10 A peak

5 A continuous operation,
10 A peak

5 A continuous operation,
10 A peakPower supply

120240 V AC, single phase,
50-60 Hz (factory configured)120-240 V AC, single phase,
50-60 Hz (factory configured)120-240 V AC, single phase,
50-60 Hz (factory configured)

4x digital input, 24 V DC,
sink 4x digital output, 24 V DC,
sink 1x analog input, differential,±10 V DC, 12 bit

2x digital input, 24 V DC,
sink 2x digital output, 24 V DC,
source 1x analog input, differential, ±10 V DC, 12 bit 1x analog
output, differential, ±10 VDC,
10 bit 2x RS-422 high-speed
output for position trigger (PEG)

4x digital input, 24 V DC,
sink 4x digital output, 24 V DC,
source 2x analog input, differential, ±10 V DC, 12 bit 2x analog
output, differential, ±10 V DC,
10 bit 4x RS-422 high-speed
output for position trigger (PEG)

USB 2.0 or TCP/IP

TCP/IP

TCP/IP

Motor output voltage
Motor types

User I/O (Without
reference and limit
switch)Communication
Interlock / MotionStop
Connector interface
Mass (approx.)

1x24 V DC

1x24 V DC

1x24 V DC

Rear panel connectors Sub-D
for motor and signal connections
IEC 60320 type C14 for power
supplyRear panel connectors Sub-D
for motor and signal connections
IEC 60320 type C14 for power
supplyRear panel connectors Sub-D
for motor and signal connections
IEC 60320 type C14 for power
supply7.3 kg

8.5 kg

9.3 kgMotion Control

A-811.23x00

A-81x, dimensions in mm

47

MOTION|POSITIONING

Solutions for Motion CentricIndustrial Automation

Motion Control

Positioning and motion tasks in industrial automation such as those in assembly, semiconductor manufacturing, mechanical engineering, laser material processing, inspection systems or in additive manufacturing
demand solutions that need to be robust and reliable. Submicrometer accuracy, exact position reproducibility,
high dynamics, and throughput are just as essential. This is particularly the case with industry 4.0 where safety
and simple networking options play an important role.

SMARTER MOTION
AND POSITIONING
What makes a positioner and motion solution smart? What functions and features
must a high-performance control solution
offer to make smart motion and positioning possible? PI has identified the following list of basic requirements that makeit possible to offer solutions for industrial
applications that fulfill the high demands
for precision and dynamics irrespective of
the number of motion axes.

nFunctional safetynCommunication via fieldbus interfacesnAutotuningnSynchronization of the individual axes in the systemnMultidimensional motion profilesn

3-DOF compensation of the position errorn

Yaw compensation for gantry solutionsn

Suppression of system oscillationn

Robust control behaviorn E
 asy integration into the higher-level automation

environment

48

W W W. P I . W SCOMPLETE SOLUTIONS FOR HIGH-THROUGHPUT
AND HIGH-PRECISION MULTI-AXIS APPLICATIONS
Those requirements can only be fulfilled when the mechanics, drive technology, and control electronics ofthe positioning system are perfectly matched to each other.
A solution from a single-source supplier does not just offer the customer sophisticated positioning technology
and high-performance control solutions, but also faster start-up and high flexibility when implementing new
requirements.

UDMnt

Motion Control

SPiiPlusEC

HIGH-PERFORMANCE MOTION CONTROL SYSTEMSACS Motion Control offers distributed-architecture motion control systems, completely modular, with components organized over three levels: The first level is the user interface. This is basically the host software andallows communication with the motion system.
The devices on the second level are called motion controllers. The motion controller is responsible for communication with the host software and also takes care of everything related to profile generation, trajectory,
macros, diagnostics, and so on. The position commands are sent to the universal drive modules on the thirdlevel via an EtherCAT real-time network. In some products, the motion controller, the drives, and the power
supplies are integrated into one housing. These products are called control modules.
The universal drive modules on the third level include the digital servo processor (DSP). It performs the servo
positioning of the axes. The drive modules power and actuate the motors, handle the feedback devices,manage the I/Os, and analyze the sensor signals for closed-loop positioning control.

49

MOTION|POSITIONING

A-60x.MTT PIglide Manual X-Y-Tilt Platform
Compatible with A-60x and A-62x

n T
 able diameters from 75 to 300 mm
n M
 anual operationn 4
 degrees of freedom: X, Y, θX, θYn C lear aperturen D irectly mounts to A-60x and A-62x

Table diameter/mm

Travel range X,YTravel range θX, θY

Overall mass/kg

Moment of inertia/kg·mm²

A-602.MTT

75

±3 mm

±1,25°

0,8

620

A-603.MTT

100

±3 mm

±1,25°

1,5

2090

A-604.MTT

150

±3 mm

±1,25°

4

12900

A-605.MTT

200

±3 mm

±1,25°

8,6

52100

A-607.MTT

300

±3 mm

±1,25°

25

319000

Table diameter /mm

Compatibility with A-60x

Compatibility with A-62x

A-602.MTT

75

A-602.xxx

A-603.MTT

100

A-603.xxx

A-623.xxx

A-604.MTT

150

A-604.xxx

A-624.xxx

A-605.MTT

200

A-605.xxx

A-607.MTT

300

A-607.xxx

A-627.xxx

Accessories

A-60x.MTT, dimensions in mm

A-602 / A-603

50

A-602.MTT
A-603.MTT
A-604.MTT
A-605.MTT
A-607.MTT

A-604 through A-607

A

B

C

D

E

75
100
150
200
300

25
30
35
45
55

30
50
75
100
150

50
75
125
150
250

M3x0.5, 6 DEEP
M4x0.7, 8 DEEP
M5x0.8, 10 DEEP
M6x0.5, 6 DEEP
M3x0.5, 6 DEEPW W W. P I . W S

A-80x PIglide Filter and Air Preparation Kits
Accessories for Air Bearing Stagesn C
 leans and filters compressed

air supplynRegulates supply pressurenOptional pressure switchn R ecommended for use with

all PIglide air bearing productsnCustomization available

Overview

Characteristics

In order to guarantee long-term reliability and proper operation of air bearings, their air supply must be clean, dry, andoil free. Contamination in the air can cause a reduction in
stiffness and load capacity as well as increase in friction.
Eventually, the bearing will be damaged and fail due tocontamination. To prevent such contamination, PI offers
efficient and cost effective air preparation assemblies whichgive users a simple way to clean any air supply. These kitsfilter particles and remove oil down to ISO 8573-1 Class 1.

n M
 ulti-stage filtration – multiple filter elements enable the

PI recommends the A-801 model for installations where theair supply quality is not clean to ISO 8573-1 Class 3 or for
installations supporting more than four axes of air bearing
motion.
If the air supply is clean and oil free to ISO 8573-1 Class 3 andthe installation requires less than 1ww0 SCFM (300 SLPM)
of air flow, customers may select the smaller A-802 model.
Customers unsure of their air supply quality should use theA-801 model.
If the compressed air supply contains moisture (ISO 8573-1
Class 4 or higher, dew point higher than 0°C), PI recommends
adding a dryer (desiccant or refrigeration type) to the air
supply upstream of the air preparation kit.

n P
 ressure regulation – the assembly includes a pressure

regulator with integrated pressure gage. Adjustments tothe bearing supply pressure are easily made.
n S hut-off Valve – a manual shut-off valve is standard withthe air preparation kit.
n T ubing and fittings – PI offers a variety of air fittings for theAccessories

Sizing & Selection

air preparation assembly to remove the most common air
contaminants.

input and the output connections to the air preparation kit.
If you do not see the fitting you require, please contact
us for customizations. 2 meters of tubing to connect the
air preparation kit to the air bearing are included with eachkit.
n S emi-automatic drains – allow easy removal of captured

materials.
n O ptional Pressure switch – when used to supply a motor-

ized air bearing stage, the air preparation kit should bepurchased with the optional air pressure switch. This
switch can be wired into the Motion-Stop input of the
motion controller to help prevent damage to the air bearing in the event of supply pressure failure. The set point of
the switch is adjustable.
51

MOTION|POSITIONING

A-801A-802

Large 4-stage air preparation kit

Small 2-stage air preparation kit

60 SCFM (1680 SLPM)

10 SCFM (300 SLPM)

as desired

Class 3 or better

150 bar (1035 kPa)

150 bar (1035 kPa)

Aluminum

Polycarbonate

4.2 kg

0.7 kgOption 1
Pressure Switch

1 = None

2 = N/O contact, adjustable set point

Option 2
Input Air Fitting

0 = one-touch fitting, 6 mm and 8 mm external
diameter in the scope of delivery

0 = one-touch fitting, 1/4” and 3/8” external diameterin the scope of delivery

Option 3
Output Air Fitting

0 = one-touch fitting, 6 mm and 8 mm external
diameter in the scope of delivery

0 = one-touch fitting, 1/4” and 3/8” external diameterin the scope of delivery

Description
Air supply
Max flowCompressed
air supply quality(ISO 8573-1)
Max input pressure
MiscellaneousPrimary construction
Mass
Options

Accessories

A-801.100, dimensions in mm

52

All kits require a compressed air supply
with dry air according to ISO 8573-1 Class 3
or better (dew point no greater than 0°C).

W W W. P I . W S

A-801.200, dimensions in mm

A-802.100, dimensions in mm

Accessories

A-802.200, dimensions in mm

Air consumption below the set point, open pressure switch (left).
Air consumption above the set point, closed pressure switch (right).

MOTION53|

POSITIONING

Product Overview PIMag® Stages
Linear Motors and Voice Coil Drives

V-273, V-275, V-277PIMag® VC Voice Coil Actuators
High Dynamics & Force Control Optionn	Push force up to 20 Nn

Velocity up to 750 mm/snIntegrated linear encoder, 0.01 µm resolutionnWeight force compensationn

Optional force sensor with 1 mN resolutionnHigh scanning frequencies, fast step-and-settlenWear-free flexure guiding for long lifetimenCompact design & customization

V-522, V-524, V-528 High-Dynamics PIMag® Linear Stage
Voice Coil Direct Drive With Direct Position Measurementn	Fast scanning and positioningn	Travel ranges 5 mm, 10 mm, 20 mmn	Scanning frequencies of more than 10 Hzn	Max. velocity 250 mm/s

Product Overview
PIMag® Stagesn	Crossed roller bearings for the highest precision

54

W W W. P I . W S

VV-551 PIMag® Precision Linear Stage High Velocity
and Precision due to Magnetic Direct Driven

Travel ranges to 230 mmnVelocity up to 0.5 m/snAbsolute encoder with 1 nm resolutionnExcellent guiding accuracynCompact design with 160 mm widthn	Optional weight compensation for verticaloperation

V-731 High-Precision XY Stage
High Travel Accuracy and Stability, Magnetic Direct Drive
Travel range 205 mm × 205 mm (8”)

nUnidirectional repeatability to 0.05 µmnVelocity to 200 mm/snIncremental encoder with 10 nm resolutionnOther travel ranges available on requestn

Optionally with stepper motor

Product Overview
PIMag® Stagesn

55

MOTION|POSITIONING

Engineered Systems Capabilities

Precision components, stable control and a great deal of experience in engineering
are essential for high-precision complex motion and positioning solutions. PI isa supplier of technologically sophisticated drive components and high-precision
positioners and also offers all levels of integration up to the turnkey solution.
Engineering services have been a part of PI’s core business for many years. Complete
solutions, fitting seamlessly into existing processes, advance automation in major
research installations as well as manufacturing and inspection processes for chipproduction or photonics packaging.

Core Competencesn A pplication support and consulting for motion and positioning applicationsn R eliable and prompt series production even for large quantities

About PI

Gantries are normally equipped withlinear motors. Travel ranges of up to
2 meters in XY are possible. If preferred,
DC or stepper motors can be used for
the Z axis. If nanometer precision isrequired, piezo actuators take care of
dynamic fine adjustment.

nEconomic designnCommissioning of turnkey solutionsnComplex multi-axis designs and parallel kinematic roboticsn B road spectrum of technologies: Drive, guide, and sensor technologiesnIn-house motion control electronics and software platformn C
 ustomized software integration such as Epics, LabVIEW, Tango, …
n T
 op-quality components from PI’s broad portfolio of high-end standard

products

56

W W W. P I . W S

PI’s Global Services

WHAT IS “WORLD CLASS”

SUPPORT FROM START TO FINISH

Customers everywhere would define “World Class Customer
Support” differently. They may consider the highest priority
being the speed of response, the level of competence of theperson that deals with the request, or it could simply be how
quickly the solution was found. Whatever the priority is forcustomer service and support, PI is committed to exceeding
all expectations that relate to our service deliverables.

PI is dedicated to supporting its customers’ right from theinitial consultation through to when a customer has purchased
a PI system. But we don’t stop there, PI’s services division iscommitted to ensuring that every aspect of owning a PI stage
is catered for. Including:

PI’s Global Service Division (GSD) is focused on ­ensuring that:
The Right People are;n

In the Right Place;n

At the Right Time;nWith the Right Skills.

Quick Start – On-site support setting up a new system;n T raining – Ensuring that a new user gets the most outof their PI system;n S upport – On-going remote and on-site continued

support for the whole life of any system.

This level of conditioning means that PI’s customers areable to benefit from World Class customer support services
regardless of their requirement, challenge or need.

Every customer is unique with their applications, e­ nvironments, challenges and the way they like to be supported.
As such, PI has a series of packaged service offerings tocover most customer demands, but in a
­ ddition to that, PI candesign bespoke flexible s­ ervice packages that are tailored
exactly to match each ­customer needs.

57

MOTION|POSITIONING

About PInn

The PI Group Milestones
A Success Story

Well known for the high quality of its
products, PI (Physik Instrumente) has
been one of the leading players in the
global market for precision positioning
technology for many years. PI has beendeveloping and manufacturing standard

and OEM products with piezo or motor
drives for more than 40 years. In addition
to four locations in Germany, the PI Groupis represented internationally by fifteen
sales and service subsidiaries. All of ourcustomers worldwide can rely on this.

Market introductionof PILine® ultrasonicpiezomotors

Foundation of PI Ceramicin Thuringia, Germany,
cornerstone for market
leadership in nanopositioning technology
Founding year
of PI

2001

1998

1994

1993

1992

Market introduction of capacitive
position sensors, implementationin piezo-based nanopositioning
systems

1991

1987

1970

Market introductionof six-axis parallelkinematic positioning
systems (Hexapods)

Market introductionof digital
control electronics

About PINew
subsidiaryin the USA

New
subsidiaryin Japan

New subsidiaries
in Great Britain
and France

58

W W W. P I . W S

Newsubsidiary
in Italy

Market introductionof the PICMA®
multilayer piezo
actuators

2015

2016

Market introductionof the magnetic
PIMag® direct drives

Acquisition ofmajority sharesin ACS Motion
Control

2014

Acquisitionof majority sharesin miCos GmbH,
Eschbach, Germany

Introductionof air bearings

2011

Market introductionof the NEXLINE®
high-performancepiezo linear drives

2002

2004

2007

Acquisitionof Nelson
Air Corp., USA

Market introductionof Q-Motion®
and PiezoMikes

Market introductionof NEXACT®
piezo linear drives
New subsidiaries
in Korea andSingapore

New subsidiaries
in Taiwan and theNetherlands

59

MOTION|POSITIONING

About PINew
subsidiaryin China

|

POSITIONING

Headquarters

Subsidiaries

GERMANY

USA (East) & CANADA

USA (West) & MEXICO

Physik Instrumente (PI)GmbH & Co. KG
Auf der Roemerstrasse 176228 Karlsruhe
Phone +49 721 4846-0
Fax		 +49 721 4846-1019
info@pi.ws
www.pi.ws

PI (Physik Instrumente) L.P.
Auburn, MA 01501
www.pi-usa.us

PI (Physik Instrumente) L.P.
Irvine, CA 92620
www.pi-usa.us

USA (San Francisco Bay Area)

UK & IRELAND

PI (Physik Instrumente) L.P.
Sausalito, CA 94965
www.pi-usa.us

PI (Physik Instrumente) Ltd.
Cranfield, Bedford
www.physikinstrumente.co.uk

ITALY		NETHERLANDS

Physik Instrumente (PI) S. r. l.
Bressowww.pionline.it

PI Benelux B.V.
Sint-Oedenrode
www.pi.ws/benelux

FRANCE		SPAIN

PI France SAS
Aix-en-Provence
www.pi.ws

Micos Iberia S.L.
Vilanova i la Geltrú
www.pimicos.es

PI miCos GmbH
Freiburger Strasse 30
79427 Eschbach
Phone +49 7634 5057-0
Fax		 +49 7634 5057-99
info@pimicos.com
www.pi.ws
PI Ceramic GmbH
Lindenstrasse
07589 Lederhose
Phone +49 36604 882-0
Fax		 +49 36604 882-4109
info@piceramic.com
www.piceramic.com

JAPAN
PI Japan Co., Ltd.
Tokyo
www.pi-japan.jp

PI Japan Co., Ltd.
Osaka
www.pi-japan.jp

CHINA© Physik Instrumente (PI) GmbH & Co. KG
All contents, including texts, graphics, data etc., as well as their layout,
are subject to copyright and other protective laws. Any copying, modification or redistribution in whole or in parts is subject to a written
permission of PI.
Although the information in this document has been compiled withthe greatest care, errors cannot be ruled out completely. Therefore,
we cannot guarantee for the information being complete, correct and
up to date. Illustrations may differ from the original and are not bind­ing. PI reserves the right to supplement or change the information
provided without prior notice.

Physik Instrumente(PI Shanghai) Co., Ltd.
Shanghaiwww.pi-china.cn

Physik Instrumente(PI Shanghai) Co., Ltd.
Beijing
www.pi-china.cn

SOUTHEAST ASIA

TAIWAN

PI (Physik Instrumente)
Singapore LLP
Singaporewww.pi-singapore.sg
For ID / MY / PH / SG / TH / VNM

Physik Instrumente (PI)Taiwan Ltd.
Taipeiwww.pi-taiwan.com.tw

KOREA
PI Korea Ltd.
Seoul
www.pikorea.co.kr

W W W. P I . W S

BRO59E PIglide Subcatalog 06/2017 1. Subject to change without notice. © Physik Instrumente (PI) GmbH & Co. KG 2017

MOTION