UHP Valves, Fittings & System Integrate

NDD Series
Diaphragm valve
290psig (2.0MPa(G))

UHP Gas Series

The NDD series are 290psig (2.0MPa(G)) working pressure diaphragmvalves designed for controlling high purity gas systems for a wide
range of UHP applications such as manufacturing semiconductors,electronic components, and electronic materials.
Specifications
Size

NDD4 (1/4”)

Cv *10.27

Manual valve 0.7
Pneumatic valve 0.5
290psig (2.0MPa(G))

Maximum Operating Pressure
Wetted Area Volume*2

NDD8 (1/2”)

0.083 in ( 1.36 cm )3Cycle Life(Our N2 filled test
performance

Body Material

SUS316L

SurfaceRoughness≤ Rz 126µin (3.2μm)≤ Ra 20µin (0.5μm)≤ Rz 28 µin (0.7μm)≤ Ra 5 µin (0.13μm)

PolishMechanical polishedElectro polished(Double melt material)

Single bagged package Double bagged package-10 °C ~ 150 °C

Body

SUS316L, SUS316LE (Double melt material)-10 °C ~ 150 °C

Seat

PCTFE, PFA and PI

Diaphragm

Cobalt alloy-10 °C ~ 60°C

(Pneumatic Valve)

SEP
SUS316LE

Packaging

Atmospheric Temperature

Actuation Pressure

EP

Degreasing + Precision cleaning-10 °C ~ 80°C

Leak Rates

STDCleaning

3PCTFE
FluidPFATemperature
PIAcross the Seat
He Leak Rates
InboardHe Leak Rates

Grade≤1×10 -9 SCCS

( ≤1×10 -10 Pa · m3 /s )≤1×10 -9 SCCS

( ≤1×10 -10 Pa · m3 /s )73 ~ 102 psig ( 0.5 ~ 0.7MPa(G) )Manual Valve

100,000 cycles) Pneumatic Valve4,000,000 cycles*1 The minimum value is stated by Cv value measurement (room temperature) based on SEMASPEC-90120394B-STD.
*2 Calculated value from the CVC male drawing dimensions.

Precautions
1) The pneumatic UHP valves are not guaranteed to function if their exterior is submerged inside a vacuum.
2) For high temperature applications, please select appropriate material for air-fittings and tubes to ensure proper performance.

TypeModelSize

Operation

Valve
Shape

Pressure

Connection

Seat
Material

NDD

4M

S

DV

C

NDD: NDD-type
Diaphragm valve

4 : 1/4”
6 : 3/8”
8 : 1/2”

M : Manual valve
C : Normally closed

S : Straight
L : L-type
A : Angle

D:290psig (2.0MPa(G) )V : CVC male
VF : CVC femaleW : Tube end
S : Compression fitting

C : PCTFE
A : PFA
P : PI(290psig (2.0MPa(G)) spec)

Handle Color

GradeEP-316L
STD-316L : Mechanical polished + SUS316L
Not shown: Blue (standard)
EP-316L : Electro polished + SUS316L
BK : Black WH : WhiteSEP-316LE : Electro polished + SUS316LE
GR : Green PK : Pink
(Double melt material)
RD : Red
YG : Yellow-green
SL : Silver LB : Light blue
BR : Brown OR : Orange
YE : Yellow PU : Purple

Dimensions

Unit: inch (mm)NDD Pneumatic Valve
Model

TypeConnectionLNDD4CSD -V □1/4” CVC maleNDD8CSD - V□

1/2”CVC male

L1HH1ABCM

2.24(57)

3.03(77)0.43(11)

1.26(32)

1.10(28)0.98(25)

2-M5
1.00
Depth
Rc1/8(25.4)
0.20(5.0)

3.03(77)

3.94(100)0.63(16)

1.56 1.24(39.7) (31.5)

1.10(28)

1.10(28)

NDD4CSD -VF □2.78
1/4”CVC female (70.6)

3.03(77)0.43(11)

1.26(32)

1.10(28)0.98(25)

2-M51.00
Depth(25.4) Rc1/8 0.20(5.0)

NDD8CSD - VF □1/2”CVC female

3.27(83)

3.94(100)0.63(16)

1.56 1.24(39.7) (31.5)

1.10(28)

1.10(28)

NDD4CSD - S □

1/4”
1.89
Compression fitting (48)3.03(77)0.43(11)

1.26(32)

1.10(28)0.98(25)2-M5
1.00 Rc1/8 Depth(25.4)
0.20(5.0)

NDD6CSD -S □2.52 0.50 3.94
3/8”
Compression fitting (64) (12.7) (100)0.63(16)

1.56 1.24(39.7) (31.5)

1.10(28)

1.10(28)

Rc1/8

2-M5
Depth
0.20(5.0)

NDD8CSD -S □1/2”
2.52 0.50 3.94
Compression fitting (64) (12.7) (100)

0.63
(16)

1.56 1.24(39.7) (31.5)

1.10(28)

1.10(28)

Rc1/8

2-M5
Depth
0.20(5.0)

NDD4CSD-W□

1/4” Butt welding (54)

2.13

3.03
(77)

0.43
(11)

1.26(32)

1.10(28)

0.98
(25)

2-M5
1.00
Depth
(25.4) Rc1/8 0.20(5.0)

NDD6CSD- W□

3/8” Butt welding

2.72
(69)

3.94
(100)

0.63
(16)

1.56 1.24(39.7) (31.5)

1.10(28)

1.10(28)

Rc1/8

2-M5
Depth
0.20(5.0)

NDD8CSD-W□

1/2” Butt welding

2.72(69)

3.94(100)0.63(16)

1.56 1.24(39.7) (31.5)

1.10(28)

1.10(28)

Rc1/8

2-M5
Depth
0.20(5.0)

TypeConnection

LH

H1A

BCM

M1

NDD4MSD - V □1/4” CVC male

2.24(57)

1.93(49)

0.43
(11)

1.50(38)

1.10(28)0.98(25)

1.00(25.4)

2-M5
Depth
0.20(5.0)

NDD8MSD -V □1/2”CVC male

3.03(77)

2.36(60)

0.63(16)

1.50 1.24(38) (31.5)

1.10(28)

2-M5
1.10 Depth(28) 0.20(5.0)

NDD4MSD - VF□

1/4”CVC female (70.6)

2.78

1.93(49)

0.43(11)1.50(38)

1.10(28)0.98(25)

1.00(25.4)

NDD8MSD - VF □1/2”CVC female

3.27(83)

2.36(60)

0.63(16)

1.50 1.24(38) (31.5)

1.10(28)

2-M5
1.10 Depth(28) 0.20(5.0)

NDD4MSD - S □1/4”
Compression fitting

1.89(48)0.31(7.9)

1.93(49)

0.43(11)1.50(38)

1.10(28)0.98(25)

1.00(25.4)

NDD6MSD -S □3/8”
Compression fitting

2.52 0.50(64) (12.7)

2.36(60)

0.63(16)

1.50 1.24(38) (31.5)

1.10(28)

2-M5
1.10 Depth(28) 0.20(5.0)

NDD8MSD-S□

2.52 0.50
1/2”Compression fitting (64) (12.7)

2.36(60)

0.63(16)

1.50 1.24(38) (31.5)

1.10(28)

2-M5
1.10 Depth(28) 0.20(5.0)

0.31(7.9)

P

Rc1/8

Rc1/8

M1

2-M5
Depth
0.20(5.0)

2-M5
Depth
0.20(5.0)

NDD Manual Valve
Model

L1

2-M5
Depth0.20(5.0)

2-M5
Depth
0.20(5.0)

2-M5
Depth
0.20(5.0)

NDD4MSD - W□ 1/4” Butt welding

2.13(54)

1.93(49)

0.43(11)1.50(38)

1.10(28)0.98(25)

1.00(25.4)

NDD6MSD - W □ 3/8” Butt welding

2.72(69)

2.36(60)

0.63(16)

1.50 1.24(38) (31.5)

1.10(28)

2-M5
1.10 Depth(28) 0.20(5.0)

1/2” Butt welding

2.72(69)

2.36(60)

0.63(16)

1.50 1.24(38) (31.5)

1.10(28)

2-M5
1.10 Depth(28) 0.20(5.0)

NDD8MSD-W□

22.09①