AIR FILTER

AIR FILTER

Features
Various models
1. Our abundant product line-up includes pre-filters (panel, roll type, etc.), and medium (long lifetime, large air
volume, anti sea salt, thin type, etc.). The most suitable filters for various applications are available.
2. Low boron filters and sterilizing enzyme filters have been added to our line-up, and our wide selection canmeet your various needs. Choose from various grades of collection efficiency and pressure drop.
3. We offer various types of chemical filters for various applications, such as AHU/MAU, RA processing andEX processing, in both activated carbon (granular activated carbon) based and ion exchange resin .
4. We can design the filter with various requirements for its collection efficiency and pressure drop.
Environmentally friendly
In consideration of protecting the global environment, we have media changeable filters which the frames canbe re-used.
A wide range of gases can be removed
Various gases which are difficult to handle in semiconductor or LCD production plants, such as acid gases (ex.
NOx), alkali gases (ex. ammonia) and organic gases (ex. ester-DOP or so) can be removed.
Various Dimensions
We can design the filter with various dimension requested.

Contents
AIR FILTER

１．Particles in Atomosphere… …………………………………………………………… 2
２．Filter application example… …………………………………………………………… 3
３．Products
Type

Grade

Name

Type

Media

Model

Eﬃciency

Inspection

TargetParticle

Page

（μｍ）

Antibacterial

Pre

Antibacterial pre Panelmedium Separator
Antibacterial Medium performance Antibacterial
performance
Antibacterial

ＨＥＰＡ

Antibacterial HEPA Separator

General Medium performance Elelta

Mini pleats

Antifungal Medium performance Anti fungal Elelta Mini pleats1

Non-woven

DS-BK257

Mass weighing methodー3Glass paper

AST-BK2

Light dispersion
65,90,95 addition methodー3Glass paper

ATMC-BK2 99.97

Calculation method 0.3μｍ

3Non-woven

EML
EML-MF

65,90

Light dispersion
addition method

ー

4

ー

5

Non-woven

EML-B

65,90

Light dispersion
addition method

GeneralPre

DS-S

Insertion panel Non-woven

DS-S

90

Mass weighing methodー6GeneralPre

Dusclean

Panel

Non-woven

DS

57〜82

Mass weighing methodー7Light dispersion
65,90,95 addition methodー8General Medium performance Lelphi

Embossed

Glass paper

LMXL
LMEL

Salt corrosion
countermeasure Medium performance Builtron

Double pleats Non-woven

BLT-S

90

Light dispersion
addition method

ー

9

99.97
0.3μｍ

Calculation method 0.3μｍ

10Calculation method 0.3μｍ

11Calculation method 0.3μｍ

12Calculation method 0.3μｍ

13Calculation method 0.1μｍ

14General

ＨＥＰＡ

AtomosSeparator

Glass paper

ATM

General

ＨＥＰＡ

AtomosSeparator

Glass paper

ATMC

General

ＨＥＰＡ

ATMLK

Mini pleats

Glass paper

ATMLK

General

ＨＥＰＡ

ATML

Mini pleats

Glass paper

ATML

General

ＵＬＰＡ

ATMML

Mini pleats

Glass paper

ATMML

General ＣＨＥＭＩＣＡＬ Puresmell

Tray

Activated charcoal PUR

About 90

ー

ー

15〜16

General ＣＨＥＭＩＣＡＬ ECSLMini pleats

Ion exchange resin ECSL

About 90

ー

ー

17〜18

ACGL
General ＣＨＥＭＩＣＡＬ
ACGM
NECS
General ＣＨＥＭＩＣＡＬNACGMini pleats
Separator

Granular activated charcoal ACGL
ACGM
Ion exchange resin NECS
Granular activated charcoal NACG

About 90

ー

ー

19〜20

About 90

ー

ー

21〜22

Mini pleats

99.97
0.3μｍ
99.99
0.3μｍ
99.99
0.3μｍ
99.9990.1μｍ

４．Technical term explanation… ………………………………………………………

23

５．Target gas and features………………………………………………………………

24

６．Handling Manual………………………………………………………………………

25

1. Particles in Atomosphere
AIR FILTER

1. Particles in Atomosphere
Particle diameter（μｍ）
0.00010.0005 0.001

0.005 0.01

0.05

0.1

0.5

1

5

10

50

100

500 1,000

5,000 10,000

AerosolCommon particles(suspended in quiet outdoor air)

FogRain drops

Spray

Plate particle and FumeBlast particle and Fume
Ammonium chloride fumes

Cast particle
Milling dust
Zinc dust

Alkric fumeLimestone dust

Mineral sulfide, flotation valve

Dust Types

Sufuric mist
Cement dust
Zinc chemical fumes

Tabaccomosaicvirus

Concentrated zinc dust
Insecticide powder

Tabacconecrosis Virus
virus
and Protein

Slack coal
Plant
sporesBacteria
PollenCarbon black
Tabbaco smoke

Gattulate

H2O NH3
O2

Gas molecule diameter

N2 CO2

Fly ashOil smoke

H2

Dust

Magnesium oxide fumes
Rosin fumes

Cleaned casting sand(enamel) Pigment (mat)Lodation fumes

Dry milk
Visible range

Hair diameter
Particle size range
Average of bottom corners

Core of salt

LegendReference sizes
400

Estimates

325 200 100 65 48 35 28 10

Mesh

2

3. Products
AIR FILTER

Antibacterial air filter
HEPA, Medium, Pre filter

Impregnated inorganic antibacterial agent with sterilization performance, safety, stability, etc. The
catalytic action of the antibacterial agent suppress growth of the collected bacteria. Furthermore, theHEPA filter is confirmed to have inactivating activity not only for bacteria but also influenza viruses.

Model number
ATMC −□− E □ BK2 □AST −□−□ E □ BK2 □Ｚ：Add“Z”for special model
BK2：Antibacterial air filter

DS −□−□−□−□ BK2 □Ｚ：Add“Z”for special model

Ｚ：Add“Z”for special model

BK2：Antibacterial air filter

BK2：Antibacterial air filter

Frame code
E42:Depth 290mm E4:Depth 150mm

Frame code
E42:Depth 290mm E4:Depth 150mm

Shows frame depth 10：10ｍｍ 20：20ｍｍ
Frame material REA：Aluminum（Standard）

Shows efficiency
90：90% 60：60%

Rated air volume：See Standard spec.（“Z”for special spec.）

Shows dimension：See Standard spec.（“Z”for special spec.）
Media No.

Shows dimension：See Standard spec.（“Z”for special spec.）

Standard speciﬁcation
Model

Grade
HEPA
MediumRoughing

ATMC-28-E4BK2
ATMC-34-E4BK2
ATMC-42-E4BK2
AST-28-90E4BK2
ASTC-28-95E4BK2
DS-150-31-REA-10BK2

Dimensions（㎜）※1 Rated air volume（㎥／ min）
H×W×D
28
610×610×150
610×760×150
34
610×915×150
4228
610×610×150
28
610×610×150
610×610×10
56

Pressure drop（Pa）
InitialFinal

Collection eﬃciency
（％）

249

498

99.97
at 0.3μm

78
118
29

196
196
147

Colorimetric concentration method

90〜95

57Mass concentration method※1 Please contact us regarding available sizes.

Materials and use environment
Material
MediumPre
HEPA
Glass ﬁber (antibacterial agent impregnated) Glass ﬁber (antibacterial agent impregnated) Non-woven fabric (antibacterial agent impregnated)
Aluminum, galvanized iron wire
Aluminum
AluminumSpecial adhesive
Special adhesive
Aluminum
Aluminum
ＥＰＤＭ
ＥＰＤＭ
＜60℃
＜95％RH

Items
Media
Frame
Sealant
Separator
GasketConstant use temperature
Constant use humidity〜HEPA filter antibacterial ability, virus inactivation ability〜
Virus Inactivation test results
Antibacterial test results
In an antibacterial test, viable bacteria was attached to the media and cultivated for 18
hours. Suppression (large reduction) of bacterial growth was confirmed, as shown in thecharts below.

（1）Staphylococcus aureus（G+）（2）Klebsiella pneumonia（G - ）Diameter0.5 〜 1.5μｍ
10,000,000

Diameter0.3 〜 1.0､length0.6 〜 6.0μｍ
10,000,000

Standard cloth（3）
Inﬂuenza virus Type A（Ｈ１Ｎ１）
Diameter0.08 〜 0.12μｍ

Virus infection value（TCID50/ml）
10,000,000

Standard cloth1,000,000

1,000,000

1,000,000

100,000

100,000

100,000

10,00010,00010,000

1,000

1,000

1,000

100

1

100

Antibacterial treated media

100

Cultivation time（h）

18

1

0

Cultivation time（h）

Untreated media

Antibacterial
processed media

100

Antibacterial treated media

10

Antibacterial test JIS L1902 (2008 bacteria liquid absorption method) was performed

3

Virus infection value was measured after a liquid virus was
dropped on the media and maintained for 24 hours. As
shown in the chart below, reduction results were achieved.

10
18

1

Cultivation time（h）※Virus inactivation test was performed at Japan Food Research Laboratories.

3. Products
Elelta filter

Elelta filter

Elelta filter Media Changeable（Low prossure drop medium filter） （Media changeable type）

Model number
EML −□−□□□EML −□−□−□−□□□

Ｚ：Add“Z”for special model

Ｚ：Add“Z”for special model
Ｊ：Add“J”for joint model

Ｊ：Add“J”for joint model

Unit Type MF：Frame ＋ media set Ｍ：media Ｆ：Frame

Shows efficiency
90：90％
65：65％

Shows frame depth P : 290mm Q : 150mm Less:65mm

Shows dimension：See Standard spec.
（“Z”stands for special spec.）

Shows efficiency 90：90％

65：65％

Shows dimension：See Standard spec.（“Z”stands for special spec.）

Standard specification（sample）
Model

Dimension
H×W×D

Rated air volume（m3/min）

EML − 36 − 90
EML − 56 − 90
EML − 56H − 90
EML − 36 − 65
EML − 56 − 65
EML − 56H − 65
EML − 56 − 90 − P − MF
EML − 56H − 90 − P − MF
EML − 56 − 90 − Q − MF
EML − 56H − 90 − Q − MF
EML − 56 − 90 −MF
EML − 56H − 90 −MF
EML − 56 − 65 − P − MF
EML − 56H − 65 − P − MF
EML − 56 − 65 − Q − MF
EML − 56H − 65 − Q − MF
EML − 56 − 65 −MF
EML − 56H − 65 −MF

500 × 500 × 65
610 × 610 × 65
610 × 305 × 65
500 × 500 × 65
610 × 610 × 65
610 × 305 × 65
610 × 610 × 290
610 × 305 × 290
610 × 610 × 150
610 × 305 × 150
610 × 610 × 65
610 × 305 × 65
610 × 610 × 290
610 × 305 × 290
610 × 610 × 150
610 × 305 × 150
610 × 610 × 65
610 × 305 × 65

36
56
28
36
56
28
56
28
56
28
56
28
56
28
56
28
56
28

Pressure drop（Pa）
Initial
Final
83
83
83
74
74
74
127
127
127
127
83
83
108
108
108
108
74
74

Collection efficiency（％）

Weight
（kg）

90
90
90
65
65
65
90
90
90
90
90
90
65
65
65
65
65
65

2.5
3.0
2.0
2.5
3.0
2.0
7.0
3.5
4.0
2.0
3.0
2.0
7.0
3.5
4.0
2.0
3.0
2.0

294
294
294
294
294
294
294
294
294
294
294
294
294
294
294
294
294
294

Materials and Temperature / Humidity
Model
EleltaElelta filter Media Changeable

Materials

Temperature / Humidity

Frame

Media

Separator

Sealant

Floor material

GasketAluminum
Steel plateNon-woven fabric

Hot melt

Polyurethane｜｜
urethane foam

Chloroprene

Normal temperature Normal humidity＜ 60℃＜ 95％ RH

Specification Air Volume vs. Pressure Drop
1000

20

10
10

Collection eﬃciency：65％：EML-36-65：EML-56-65：EML-56H-65

20
30
50
Air volume（m3/min）

100

Pressure drop（Ｐa）

Pressure drop（Ｐa）

Pressure drop（Ｐa）

500
50

50

20

10
10

Collection eﬃciency：90％：EML-36-90：EML-56-90：EML-56H-90

20
30
50
3
Air volume（m /min）

1000：EML-56(P)(Q)-90MF：EML-56H(P)(Q)-90MF
Collection eﬃciency：100％

200
100
50

100

200
100
50
20

20
10
1

：EML-56-(P)(Q)-65MF：EML-56H-(P)(Q)-65MF
Collection eﬃciency：65％

500
Pressure drop（Ｐa）

100

100

2

5
10 20 30 50
3
Air volume（m /min）

100

10
1

2

5
10 20 30 50
Air volume（m3/min）

100

4

3. Products
Mildew resistance low pressure drop medium filter

Mildew resistance lowpressure drop medium filter（Mildew resistance ELELTA）

ModelsFeatures

EML− □ − □ B □ □Mildewcide was added on the media
Low pressure drop Electret media is used
Z : Add Z for special modelJ : Add J for joint modelShows dimension :See Standard spec.
（ Z stands for special spec.）

Special mildew resistance media
Shows eﬃciency（Light-scattering integration）
90:90% 65:65%

Standard specification（sample）
Model
ＥＭＬ-３６-９０Ｂ
ＥＭＬ-５６-９０Ｂ
ＥＭＬ-５６Ｈ-９０Ｂ
ＥＭＬ-３６-６５Ｂ
ＥＭＬ-５６-６５Ｂ
ＥＭＬ-５６Ｈ-６５Ｂ

Dimension
H×W×D

Rated air volume（m3/min）

５００×５００×６５
６１０×６１０×６５
６１０×３０５×６５
５００×５００×６５
６１０×６１０×６５
６１０×３０５×６５

３６
５６
２８
３６
５６
２８

Components and use environment
Items

Materials

Temp.& Hum

Frame
Media
RibbonSealant
Gasket
Use temperature (constant)
Use humidity

Description
Aluminum
Electret Non-woven fabric (mildew resistance)synthetic resin
polyurethane
chloroprene<60℃<95％RH

Mildewcide is sandwiched between two sheets of Non-woven fabric,
growth of collected mold on the media can be suppressed for longhours. However, there is no agent which can suppress all types ofmold growth.
Media (Non-woven fabric)Media(Non-woven fabric)

Pressure drop（Pa）
InitialFinal

Collection eﬃciency（%）（Colorimetric concentration method）

94

２９４

９０

84

２９４

６５

Weight
（kg）
２.５
３.０
２.０
２.５
３.０
２.０

Mildew resistance agent
Effective ingredient2-(4-Thiazolyl)benzimidazole
N

Structural formula

N
H

N
S

Stability
SafetyExtremely chemically stable chemical compound,difficult to react with other materials, does notdissolve in water, solubility of an organic solvent.
Certified as a food additive in 1978

Mold used for the examination

Aspergillus

Gliocladium

Penicillium

Air flow
Chaetomium

Paecilomyces

Mold resistance test (Compliance to JIS Z 2911 B)

Mildewcide
Descriptions in this catalog are subject to change without prior notice.

5

Mold grownon the culture media

Mold growth on the media surface under severe
conditions the same as on the surface of culture media

No mold growth on the media surface
even under severe conditions

Non-treated product (4 weeks later)

Treated product (4 weeks later)3. Products
DS-S Filter

DS-S Filter（High efficiency, long lifetime
roughing filter）
Model

FeaturesDS − S − 56 − 90 − 46

High collection efficiency,
Large dust volume capacity,
Light and excellent handling capacity

Frame depth : See Standard spec.
Collection efficiency : See Standard spec.
Rated air volume : See Standard spec.

Standard Specifications
No.

Model

Dimensions (mm)
H×W×D

Rated air volume（m3/min）

1
2
3

DS-S-56-90-96
DS-S-56-90-46
DS-S-56-90-22

594 × 594 × 96
594 × 594 × 46
594 × 594 × 22

56
56
56

Pressure drop（Pa）
Initial
Final
52
75
50

Collection efficiency（％）
Mass concentration method

294
294
294

90
90
90

Components and use environment
Item

Media

Metal net

Frame

Sealant

Materials Non-woven fabric Galvanized iron wire Waterproof paper Special adhesive

Constant use temperature Constant use humidity<60°C<95％ RH

Metal net

Air flow

Media

Frame

200

300

100

250

50

10

1

：DS-S-56-90-96：DS-S-56-90-46：DS-S-56-90-221020
30 40 50 6070
Air volume（m3/min）

100

Pressure drop（Pa）

Pressure drop（Pa）

Specification Pressure drop vs. Dust volume capacity

200
150
100
50
0
0

：DS-S-56-90-96：DS-S-56-90-46：DS-S-56-90-22

200
400
600
800
Dust volume capacity（g/unit）

1000

6

3. Products
Dusclean Filter

DuscleanFilter（Non woven fabric prefilter）
Model number(Frame+Media)（Media Only）

DS −□−□−□−□□□DS −□−□− M

Ｚ：Add“Z”for special model

Ｍ：Media Only

Ｊ：Add“J”for joint modelShows dimension: See Standard spec.
（“Z”stands for special spec.)

Shows frame depthMedia No.

Frame material REA：Aluminum（Standard）RES：Stainless SteelShows dimension：See Standard spec.（“Z”stands for special spec.）
Media No.

Media
Model

Dimension（m） Thickness Air velocity(m/sec)
W×L(mm)

Material

DS − 140
DS − 150
DS − 300
DS − 400
DS − 600
DS − 340
DS − 340R
DS − 465

Re-condition

Noncombustibility

49
147
196

45
57
72

○
○
○

○
○
○

2.5

59

196

76

○

○

18

2.5

88

196

82

○

○

20
20

2.5
2.5

49
59

196
196

75
85

×
×

○
○

1.6 × 20

15

1.5

74

196

80

○

○

1.6 × 2019

0.5/0.7

45/63

392

98

×

○

1.6 × 30
1.6 × 30
1.6 × 30

7
7
10

2.0
2.5
2.5

1.6 × 2013

1.6 × 20
1.6 × 20
1.6 × 20

Polyester※ 1 ASRAE powder was used for test powder

Standard specification（sample）
Dimension（mm）※1
H×W×D

Model
DS-150-22-REA -10
DS-150-31-REA -10
DS-150-31H-REA-10
DS-300-22-REA -12
DS-300-31-REA -12
DS-300-31H-REA-12
DS-400-22-REA -15
DS-400-31-REA -15
DS-400-31H-REA-15
DS-600-22-REA -20
DS-600-31-REA -20
DS-600-31H-REA-20
DS-600-22-REA -25
DS-600-31-REA -25
DS-600-31H-REA-25

500 × 500 × 10
610 × 610 × 10
610 × 305 × 10
500 × 500 × 12
610 × 610 × 12
610 × 305 × 12
500 × 500 × 15
610 × 610 × 15
610 × 305 × 15
500 × 500 × 20
610 × 610 × 20
610 × 305 × 20
500 × 500 × 25
610 × 610 × 25
610 × 305 × 25

Rated air volume（m3/min）

Materials

7

Media

Aluminum

Polyester

Collection efficiency ※2（％）

Weight
（kg）
0.9
1.1
0.7
0.9
1.2
1.0
0.9
1.3
0.8
1.0
1.4
0.8
1.0
1.4
0.8

※1 For 10mm thickness products both sides will have face guards.
※2 ASRAE powder was used for test powder

Temperature / Humidity
Normal temperature Normal humidity＜ 60℃

Pressure drop（Pa）
InitialFinal37				
56
29
147
57
28				
37				
56
49
196
72
28				
37				
56
59
196
76
28				
37				
56
88
196
82
28				
37				
56
88
196
82
28				

Materials and Temperature / Humidity
Frame

Collection efficiency
※1（％）

20
29
49

Polyester
Polyester
Polyester
Polyester
Modacrylic fiber
Polyester
Modacrylic fiber
Polyester
Polyester
Polyester
Modacrylic fiber

DS − 315TS

Pressure drop（Pa）
InitialFinal＜ 95％ RH

3. Products
LELFI

LELFI

（Super low pressure drop medium filter）

FeaturesLow pressure drop:
High air volume:
Long service life:

Model

Thin design:

L M □ L−□−□−□−□ □ □Z：Add Z for special spec.
J：Add J for joint model
Unit Type（only media replacement type）MF: frame and media M: media F: frameShows frame depth（frame）（only media replace type）
P: 290mm Q: 150mm
Shows eﬃciency 95:95% 90:90% 65:65%
Shows dimension:See Standard spec.（ Z stands for special spec.）
Media No. X: non electrostatically charged media E: Electrostatically charged media

Standard specification（sample）
Model
（ ）
are media replace type
LMXL−70 −95（−Q−MF）（−Q−MF）
Air conditioning for LMXL−70H−95
LMXL−70 −90（−Q−MF）
clean rooms（Non electrostatically LMXL−70H−90（−Q−MF）
charged）
LMXL−70 −65（−Q−MF）
LMXL−70H−65（−Q−MF）（−Q−MF）
Air conditioning LMEL−70 −90
for buildings LMEL−70H−90（−Q−MF）（Electrostatically LMEL−70 −65（−Q−MF）
charged） LMEL−70H−65（−Q−MF）
Main
applications

Dimensions
（mm）
H×W×D
610×610×150
610×305×150
610×610×150
610×305×150
610×610×150
610×305×150
610×610×150
610×305×150
610×610×150
610×305×150

Pressure drop（Pa）
Initial※Final

Rated air volume（m3/min）
70
（56）
35
（28）
70
（56）
35
（28）
70
（56）
35
（28）
70
（56）
35
（28）
70
（56）
35
（28）
※(

Collection
eﬃciency
（％）

150
（110）

95

135
（100）

90
294

110
（75）

65

105
（73）

90

95
（60）

65

Weight（kg）
Media changeable type Seal type
4.5
5.0
2.5
3.0
4.5
5.0
2.5
3.0
4.5
5.0
2.5
3.0
4.5
5.0
2.5
3.0
4.5
5.0
2.5
3.0

) is pressure drop responded for the rated air volume described in ().

Materials and Temperature / Humidity
Materials
Reinforcement
material
Synthetic resinMedia
Non-woven fabric

100
50

10

1

：LMEL-70-90-Q-MF：LMEL-70-65-Q-MF

10

2030 40 50 6070
Air volume（m3/min）

100

Normal temperature Normal humidity

GasketEPDM<60℃

Our conventional products（Electrostatically charged media)

LMXL-70-90-Q-MF＜95%RH

300
250
200

Low pressure drop

150
100
50
0
0

20% reduction of
consuming power

LMEL-70-90-Q-MF

350

350
Pressure drop（Pa）

Pressure drop（Pa）

Our conventional products（Non electrostatically charged media）：LMXL-70-95-Q-MF：LMXL-70-90-Q-MF：LMXL-70-65-Q-MF

Temperature / Humidity

Comparison with the conventional product（an example of pressure drop transit）

Air Volume vs. Pressure drop（representative value）
200

Floor material
Sealant
Media changeable type
Seal type
Urethane foam PolyurethanePressure drop（Pa）

Frame
Media changeable type
Seal type
Galvanized sheet iron
Aluminum2000 4000 6000 8000 10000
Use hours（h）

300
250
200
150
100
50
0
0

Low pressure drop

50% reduction of
consuming power2000 4000 6000 8000 10000
Use hours（h）

The reference value converted based on the accelerated test.（at airﬂow 56m³/min）

8

3. Products
Sea air processing Builtron

Sea air processing
Builtron（Sea air processing type medium filter）
Model

BLT −□−□ S □□Ｚ：Add“Z”for special spec.
Ｊ：Add“J”for joint model
Ｓ：For collecting sea-salt particles
Shows efficiency 95:95% 90:90% 65:65%
Shows dimension:See Standard spec.（“Z”stands for special spec.）

Standard specification（sample）
Model
BLT − 36 − 90S
BLT − 56 − 90S
BLT − 56H − 90S
BLT − 18 − 90S
BLT − 28 − 90S

Pressure drop（Pa）
InitialFinal

Collection efficiency（％）

Weight
（kg）

90
90
90
90
90

5.0
7.0
4.0
2.5
3.5

Dimension（mm）
H×W×D

Rated air volume（m3/min）

500 × 500 × 290
610 × 610 × 290
610 × 305 × 290
500 × 500 × 150
610 × 610 × 150

36
56
28
18
28

118
118
118
69
69

Temperature / Humidity
Normal temperature Normal humidity

294
294
294
294
294

Materials and Temperature / Humidity
		
Frame
Plywood

Materials
Media

Sealant

GasketNon-woven fabricPolyurethane

Chloroprene<60℃＜ 95%RH

Specification Air volume vs. Pressure drop（representative value）
1000

200
100
50
20
10

200
100
50
20

1

2

5

10

20 30 50

Air volume（m /min）
3

9：BLT-36-90S：BLT-56-90S：BLT-56H-90S
Depth :290mm

500
Pressure drop（Ｐa）

500
Pressure drop（Ｐa）

1000：BLT-18-90S：BLT-28-90S
Depth:150mm

100

10

1

2

5

10

20 30 50

Air volume（m3/min）

100

3. Products
Atomos Perfect Filter

AtomosPerfect Filter（Standard type HEPA filter）※ Low gas emission type are also available.

Model（１）Plywood frame（２）Extruded aluminum frame

ATM −□− E □□ATM −□−□−□□
Ｚ：Add“Z”for special spec.

Ｚ：Add“Z”for special spec.

Material code: Shows material-temperature table.

Frame code
E42: Depth 290mm E4: Depth 150mm E23: Depth 75mm

Shows frame depth
P: 290mm Q: 150mm R: 75mm

Rated air volume: See Standard spec.（“Z”stands for special spec.）

Rated air volume: See Standard spec.（“Z”stands for special spec.）

Standard specification（sample）
Model

Dimension（mm）
H×W×D

Rated air volume（m3/min）

ATM − 3 − P −ATM − 8 − P −ATM − 22 − P −ATM − 31 − P −ATM − 39 − P −ATM − 48 − P −ATM − 1.5 − Q −ATM − 4 − Q −ATM − 17 − Q −ATM − 21 − Q −ATM − 26 − Q −ATM − 34 − Q −200 × 200 × 290
305 × 305 × 290
500 × 500 × 290
610 × 610 × 290
610 × 760 × 290
610 × 915 × 290
200 × 200 × 150
305 × 305 × 150
610 × 610 × 150
610 × 760 × 150
610 × 915 × 150
610 × 1220 × 150

3
8
22
31
39
48
1.5
4
17
21
26
34

Pressure drop（Pa）
InitialFinal

245Collection efficiency（％）

Weight（kg）

99.97
at 0.3 μｍ

3.5
5.5
10.5
14.0
16.5
19.0
2.0
3.0
7.0
8.5
10.0
12.5

490

Materials and Temperature / Humidity
Materials			
or frame code
Frame
Media
A
PlywoodD
Plywood※
Extruded aluminum※ E42: 290mm E4: 150mm

Materials			
Separator
Sealant
GasketGlass Paper
Glass Paper
Glass Paper

Special processed paper
Aluminum
Aluminum

Polyurethane
Polyurethane
Polyurethane

Temperature / Humidity
Normal temperature Normal humidity

Chloroprene 		
Chloroprene＜ 60℃
Chloroprene＜ 85%RH＜ 95%RH

Dimension Available
Depth（mm）
290，150，75

Height（mm）
150 〜 760

Width（mm）
150 〜 1500

Air volume vs. Pressure drop：ATM-31-P-D：ATM-17-Q-D

300
200

100

50

4 5

30 40
7
10
20
3
Air volume（m /min）

99.999Collection eﬃciency（％）

Pressure drop（Pa）

500

Air volume vs. Collection Eﬃciency
at 0.3μm

99.99

99.9
40
60
80
100
120
The ratio to the rated air volume（％）

Collection eﬃciency at rated air volume（％）

Performance
Particles Diameter vs. Collection Eﬃciency
99.99

99.95

99.9
0.05 0.07 0.1
0.2 0.3
Particle size（μm）

0.5

10

3. Products
Atomos Compact filter

AtomosCompact filter（Large air volume type HEPA filter）※ Low gas emission type are also available.

Model（１）Plywood frame（２）Extruded aluminum frame

ATMC −□−□−□□□

ATMC −□− E □□□Ｚ：Add“Z”for special spec.

Ｚ：Add“Z”for special spec.

Ｔ：For large air volume type with 290mm depth

Ｔ：For large air volume type with 290mm depth

Material code: Refer to material-temperature table.

Frame code E48: Depth 290mm（for large air volume type）
E42: Depth 290mm E4: Depth 150mm E23: Depth: 75mm

Shows frame depth
P: 290mm Q: 150mm R: 75mm

Rated air volume: See Standard spec.（“Z”stands for special spec.）

Rated air volume: See Standard spec.（“Z”stands for special spec.）

Standard Specification（sample）
Class

Dimension（mm） Rated air volume（m3/min）
H×W×D

Model

ATMC − 41 − P −610 × 610 × 290
ATMC − 51 − P −610 × 760 × 290
ATMC − 28 − Q −610 × 610 × 150
Standard
ATMC − 34 − Q −610 × 760 × 150
ATMC − 17 − R −610 × 610 × 75
ATMC − 21 − R −610 × 760 × 75
610 × 610 × 290
Large air volume ATMC − 50 − P −□ T
610 × 760 × 290（special separator） ATMC − 62 − P −□ T
Large air volume ※ ATMC − 56 − E48T
610 × 610 × 290※ For large air volume type, plywood frame is not available.

41
51
28
34
17
21
50
62
56

Pressure drop（Pa）
InitialFinal

Collection efficiency（％）

Weight（kg）

99.97
at 0.3 μｍ

16.0
19.0
8.5
10.0
4.5
5.0
16.0
19.0
16.0

249
498

249 ± 20

Materials and Temperature / Humidity
Materials			
or frame code
Frame
Media

Materials		
Separator
Sealant

GasketTemperature / Humidity
Normal temperature Normal humidity

A
Plywood
Glass Paper
Special processed paper Polyurethane
Chloroprene		
D
Plywood
Glass Paper
Aluminum
Polyurethane
Chloroprene＜ 60℃
Chloroprene※
Extruded aluminum
Glass Paper
Aluminum
Polyurethane※ E42: Depth 290mm E4: Depth 150mm E23: Depth 75mm E48: Depth 290mm（for large air volume）＜ 85%RH＜ 95%RH

Dimension Available
Depth（mm）
290，150，75

Height（mm）
150 〜 760

Width（mm）
150 〜 1500

※ AT: Height dimension 150-610（mm）, Large volume type: Height dimension 150-740（mm）, Width dimension 150-1000（mm）

Performance
Air volume vs. Pressure drop

200

100

：ATMC-56-E48T

10

20
30 40 50
Air volume（m3/min）

70

at 0.3μm

99.99

99.9
40
60
80
100
120
The ratio to the rated air volume（％）

Particles Diameter vs. Collection Eﬃciency
Collection eﬃciency at rated air volume
（％）

300

50
7

11

：ATMC-41-P-D：ATMC-28-Q-D：ATMC-17-R-D：ATMC-50-P-DT

Air volume vs. Collection Eﬃciency

99.999Collection eﬃciency（％）

Pressure drop（Pa）

500

99.99

99.95

99.9
0.05 0.07 0.1
0.2
0.3
Particle size（μm）

0.5

3. Products
Large air volume minipleats ATMLK filter

Large air volume minipleats
ATMLK filter（Large air volume minipleats HEPA filter）
Model

ATMLK −□− E □□Features

Ｚ：Add“Z”for special spec.

Approximately three times the air volume

Frame code
E38: Depth 98mm
E23: Depth 75mm
E41: Depth 65mm

when compared with ATML at the same
size. Collection efficiency is 99.99%. The
lath mesh is included, standard.

Shows dimension:See Standard spec.
（“Z”stands for special spec.）

Standard specification（sample）
Dimension（mm） Rated air speed Rated air volume
H×W×D
（m/s）
（m3/min）

Model
ATMLK − 32 − E38

610 × 610 × 98

1.61

32.0

ATMLK − 28 − E23

610 × 610 × 75

1.43

28.0

ATMLK − 25 − E41

610 × 610 × 65

1.28

25.0

Pressure drop（Pa）
InitialFinal
245Collection efficiency
（％）
99.99

498

at 0.3 μ m

Weight
（kg）
5.0
4.0
3.5

※ Available for lathe mesh on the downstream side only.

Dimension Available
Height（mm）
150 〜 610

Width（mm）
150 〜 1220

※ Please ask for other sizes.

Performance
300

Collection eﬃciency by air volume
99.999Collection eﬃciency（％）

Pressure drop（Pa）

200
100
50
30

10
0.1

：奥行
Depth:98mm
98mm
Depth: 75mm
Depth: 65mm

0.3 0.5
1
Air velocity
（m/s）

2

3

Collection eﬃciency by particle size

99.995at 0.3μm

99.99

99.9
40
60
80
100
120
The ratio to the rated air volume（％）

Collection eﬃciency（％）

Air velocity-Pressure drop characteristics

at rated air volume

99.99

99.95
99.9

99.5
0.0

0.1

0.3
0.5
0.2
Particle size（μm）

12

3. Products
Atomos ATML filter

AtomosATML filter（HEPA filter）※ Low gas emission type are also available.

Model

ATML −□− E □□
Ｚ：Add
“Z”
for special spec.
Frame code
E38: Depth 98mm
E23: Depth 75mm
E41: Depth 65mm
E25: Depth 50mm
Shows dimension:See Standard spec.
（“Z”stands for special spec.）

Standard specification（sample）
Model

Dimension（mm）
H×W×D

Air velocity（m/s）

ATML − 10 − E38

610 × 610 × 98

10.0

ATML − 20 − E38

610 × 1220 × 98

20.5

ATML − 10 − E23

610 × 610 × 75

10.0

ATML − 20 − E23

610 × 1220 × 75

20.5

ATML − 10 − E41

610 × 610 × 65

ATML − 20 − E41

610 × 1220 × 65

20.5

ATML − 10 − E25

610 × 610 × 50

10.0

0.5

Rated air volume（m3/min）

Pressure drop（Pa）
Initial
Final

20.5

Weight
（kg）
4.5

84

8.0
4.0

88
294

10.0

ATML − 20 − E25
610 × 1220 × 50
※ All model is approved by FM standard（Same performance）

Collection efficiency
（％）

98

99.99

7.0

at 0.3 μ m

3.5
6.0
3.0

127

5.0

Dimension available
H（mm）
150 〜 1220

W（mm）
150 〜 1500

※ Faceguard should be on downstream side for reinforcement when filter height is between 916mm and 1220mm.

Performance
Face Velocity vs. Pressure Drop

200

100

50
30
0.07

13

0.1

0.2
0.3 0.4 0.5
Air velocity（m/s）

Rated Capacity vs. Collection Eﬃciency
99.9990.7

99.995at 0.3μm

99.99

99.9
40

Particle Diameter vs. Collection Eﬃciency

Collection eﬃciency（％）

Depth: 98mm
Depth: 75mm
Depth: 65mm
Depth: 50mm

Collection eﬃciency（％）

Pressure drop（Pa）

300

60
80
100
Rated Capacity（％）

120

99.99

99.95
0.07 0.1
0.2
0.5
0.3
Particle diameter（μm）

3. Products
Atomos ATMML filter

AtomosATMML filter（ULPA filter）※ Low gas emission type are also available.

Model

ATMML −□− E □□Ｚ：Add“Z”for special spec.
Frame code
E38: Depth 98mm
E23: Depth 75mm
E41: Depth 65mm
E25: Depth 50mm
Shows dimension:See Standard spec.
（“Z”stands for special spec.）

Standard specification（sample）
Dimension（mm） Rated air speed Rated air volume
H×W×D
（m/s）
（m3/min）

Model
ATMML − 10 − E38

610 × 610 × 98

10.0

ATMML − 20 − E38

610 × 1220 × 98

20.5

ATMML − 10 − E23

610 × 610 × 75

10.0

ATMML − 20 − E23

610 × 1220 × 75

ATMML − 10 − E41

610 × 610 × 65

10.0

ATMML − 20 − E41

610 × 1220 × 65

20.5

ATMML − 7 − E25

610 × 610 × 50

7.0

0.5

20.5

0.35
ATMML − 14 − E25 610 × 1220 × 50
※ All model is approved by FM standard（Same performance）

Pressure drop（Pa）
InitialFinal

Collection efficiency（％）

Weight
（kg）
4.5

103
108

99.9995

8.0

at 0.1・0.15 μ m

4.0
7.0

294

3.5

128

99.9996.0

at 0.1・0.15 μ m

3.0

14.5

5.0

Dimension available
H（mm）
150 〜 1220

W（mm）
150 〜 1500

※ Faceguard should be on downstream side for reinforcement when filter height is between 916mm and 1220mm.

Performance
Face Velocity vs. Pressure Drop

100

50
30
0.07

0.1

0.2
0.3 0.4 0.5
Air velocity
（m/s）

0.7

at0.1-0.15μm：奥行 98mm,75mm：奥行 65mm,50mm

99.9999

99.999
40

60
80
100
Rated Capacity（％）

Particle Diameter vs. Collection Eﬃciency
99.9999

Collection eﬃciency（％）

Depth: 98mm
Depth: 75mm
Depth: 65mm
Depth: 50mm

200

Rated Capacity vs. Collection Eﬃciency

99.99999
Collection eﬃciency（％）

Pressure drop（Pa）

300

120

99.9995

Depth: 98mm
75mm
Depth: 65mm
50mm

99.9990.07 0.1
0.2
0.5
0.3
Particle diameter
（μm）

0.7

14

3. Products
PureSmell filter

PureSmell filter（for AHU/MAU, EX processing）

Model

PUR−□−□□
Add Ｚ for special model
Media No.（※）：See table below
Shows dimension：See standard spec.（ Z stands for special spec.）

Standard speciﬁcation
Model
PUR-56W - ※PUR-56WH - ※PUR-56-※
PUR-56H - ※PUR-28-※
PUR-28H - ※Dimension（mm） H×W×D
Frame
Tray（element）
610×610×630
590×600×45
610×305×630
590×295×45
610×610×440
410×600×36
610×305×440
410×295×36
610×610×230
205×600×33
610×305×230
205×295×33

Rated air volume（m3/min）
56
28
56
28
28
14

Pressure drop（Pa）

Gas removal eﬃciency（％）

SV value

About 167／265

About 90

29,000

About 118／196

About 90

53,000

About 78／127

About 90

60,000Absorbent volume
（L）
116
57
63
31
29
14

1：With pre/after ﬁlter model is available.
2：Dimension available（HｘW）: 610x610, 610x305, 305x610 and 305x305
3：Pressure: drop is depend on type of absorbent.
（Pellet/Grain）
4：Removal eﬃciency is inﬂuenced by air volume, target gases and temperature.
5：Model PUR-56W is long-lifetime model which has about 1.8times much volume than PUR-56 . This model is suitable to remove highconcentration gases or use with mixed adsorbent.

Types of adsorbent and target gases
Absorbent（※）
Base Material
Additive
E3
Activated alumina
E5
Potassium permanganate Activated carbon
E5HHigh reﬁned Activated carbon
F
ZeoliteF4
Phosphoric acid
Activated carbon
F4H
High reﬁned Activated carbon
ZeoliteA2
Calcium hydroxide
A3H
Potassium carbonate
High reﬁned Activated carbon
O2
Manganese dioxide
Activated carbon―
C
Activated carbon

Type
PelletGrain

Target gases
Nitric oxide（NO）、Sulfur oxide（SOx）
Sulfur oxide（SOx）、Sulfur oxide（NO2）
Sulfur compoun（Methyl sulﬁde、Methyl mercaptan）

PelletGrain
PelletGrain
PelletGrain

Basic gases such as Ammonia, Amine etc.
Acid gases such as Hydrochloric acid,Nitric acid,Sulfuric acid,Acetic acid etc.
Acetic acid（SO42-、CI-、NO3-、F-etc）、Sulfur oxide（SOx）、Sulfur compound（Hydrogen sulﬁde,Methyl sulﬁde,Methyl mercaptan）
Ozone,Chlorine,Organic solvent,Nitrogen oxide（NO2）
Organic gases（ Organic solvent）Nitogen oxide※ Adsorbent E5H / F4H has about 1.5times higher performance than E5 / F4, and suitable to remove low concentration gases.

Filter media（adsorbent）
appearance
Adsorbent
Color phase

Photo

15

E3
PurpleE5,E5H,F4,F4H,A3H,C
Black

F,A2
White

O2
Black

3. Products
PureSmell filter

Materials and Temperature / Humidity
Materials
Tray（element）
Steel Plate（melamine baking paint）

Frame
Steel Plate（melamine baking paint）

Temp. & Hum.（Recommend）
Temperature（℃） Humidity（%/RH）
0〜40
30〜90

Media
Special absorbent

Weight（representative value）
Filter weight（kg）
Model

A3H

128
74
74
43
39
24

134
77
77
45
41
24

139
80
80
46
42
25

Absorbent weight（kg）

E5

E3、
F4H

A2

F4

F

145
83
83
48
44
26

157
88
90
51
47
27

163
91
93
52
48
28

167
93
95
54
49
28

171
95
97
55
50
29

Type
For acids
Nitric oxide
Nitrogen oxide
Sulfur dioxide
Hydrogen sulﬁdeTypical gases
F-、CL-、NO2-、NO3-、SO42NO
NO2
SO2
H2S

E3
○
◎
−
△
−

E5
○
−
○
◎
○

E5H
○
−
○
◎
○

Boron

B
H3BO3

−

○

For Bases

NH3、NH4+
Na+、K+−

Organic gases
Organic gases
Chlorine
Ozone

Low boiling point gases like toluene
High boiling point gases like DOP
CL2
O3

−
−
−
−

PUR-56W -※PUR-56WH-※
PUR-56-※
PUR-56H -※PUR-28-※
PUR-28H -※

O2

E5H、
C

O2

E5H、
C

A3H

E5

E3、
F4H

A2

F4

F

47
23
25
13
12
5

52
26
28
14
13
6

58
29
32
16
14
7

64
31
35
17
16
8

75
37
41
20
19
9

81
40
44
22
20
10

86
42
47
23
21
10

90
44
49
24
22
11

F
−
−
−
−
−

F4
−
−
−
−
−

F4H
−
−
−
−
−

A2
◎
−
−
△
△

A3H
◎
−
○
○
◎

O2
−
−
○
−
−

C
−
−
○
−
−

○

−

−

−

−

○

−

−

−

−

○

◎

◎

−

−

−

−

−
○
△
△

−
○
△
△

−
−
−
−

−
△
−
−

−
△
−
−

−
−
−
−

−
○
△
△

○
○
◎
◎

◎
◎
−
○

Speciﬁcation
Gas removal eﬃciency◎：Very eﬀective○：Eﬀective△：Removable −：Scarcely removable

Air Volume vs. Collection Eﬃciency（representative value）：PUR‐28‐※：PUR‐56‐※：PUR‐56W‐※

Pellet type adsorbent（E3, F, A2, O2）
300

300

200

Pressure drop（Pa）

Pressure drop
（Pa）

200

50

20

10

：PUR‐28‐※：PUR‐56‐※：PUR‐56W‐※

Grain type adsorbent（E5, E5H, F4, F4H, A3H, C）

50

20

10

20

30

50

Air volume（m3/min）

100

10

10

20

30

50

Air volume（m3/min）

100

16

3. Products
Iochemix

Iochemix（for RA processing /Ion exchange resin media type）
Model

ECSL−□−□−□−□□For acids removal

For bases removal

Add Ｚ for special model
Media No.（※） A ： For acids
B ： For bases

E ： Bending aluminum
E＊＊： Extruded aluminum
K ： Polyester Iominated plywood

Frame

Shows frame depth

R ：75mm
RS ：65mm
S ：50mmShows dimension：See standard spec.（ Z stands for special spec.）

Standard speciﬁcation
Model

Dimension（mm）
Sealant H×W×D

ECSL-10-R -E-※
ECSL-10-RS-E-※
ECSL- 7-S -E-※

610×610×75
610×610×65
610×610×50

Rated air volume（m3/min）

Rated face velocity
（m/s）

10

0.5

7

0.35

Pressure drop（Pa）

Gas removal eﬃciency（％）

Weight（kg）

About 90

6.0
5.0
4.5

About 35
About 20
About 12※Gas removal eﬃciency varies according to the used airspeed, type of gas being removed and temperature, so consult for speciﬁc situations.

Materials and Temperature / Humidity
Materials
Frame
AluminumMedia
Ion exchange resin

RibbonHot melt

Sealant
Polyurethane resin

Temp. & Hum.（Recommend）
Temperature（℃） Humidity（%/RH）
0〜40
30〜90

Dimension available
D50、65、75H
150〜1,220※1

Q
1,500

※1 It will be 2pcs connected speciﬁcatior when height over 760mm

Media type and target gases
Media Type
A
B

17

Media
Base material
Polystyrene resin
Polystyrene resin

Ion exchange group
Quaternary ammonium group
Sulfone acid group

Target gases
Type
For acids
For bases removal

ExampleSulfar oxide（SOx）、Hydrochloric acid、Hydroﬂuoric acid
Ammonia、Amine

3. Products
Iochemix

Speciﬁcation
Gas removal eﬃciency（Sample）
Element
Name
Chloride Ion
Nitrite Ion
Nitrate Ion
Salfate Ion
Boron
Ammonium Ion

Type

A

For acids removing

B

For bases removing

Chemical formula
CLNO2NO3SO42B
NH4+

Concentration（μg/m3）
Up Stream
Down Stream
0.3
3.7
0.8
4.8
0.3
1.2
0.2
3.3
0.03
0.6
0.15
4.5

Face Velocity vs. Pressure Drop（representative value）

Measaring method

92
83
75
94
95
97

IC
ICP-MS
IC

Structure drawing of ﬁlter（Mini pleats type）：ECSL‐10‐R‐E‐※：ECSL‐10‐RS‐E‐※、ECSL‐7‐S‐E‐※

Ribbon

100

Media

Frame

50

Pressure drop（Pa）Eﬃciency（％）

20

Sealant

10

7

5
0.1

0.2

0.3

0.5

1.0

Air volume
（m/s）

18

3. Products
PureChemix G

PureChemix G（for RA processing /Granular activated carbon media type）
Model

ACG□−□−□−□−□□

ACGL

ACGM

Add Ｚ for special model
Media No.（※）O：For organic gas
A：For acids
B：For bases
G：For removal of aldehyde gas
Frame
E ：Bending aluminum Frame
E：Aluminum（Mini Pleats） E＊＊：Extruded aluminum （Separator）
K ：Polyester Iominated plywood
Shows
R ：75mmframe depth
RS ：65mm（Mini Pleats） S ：50mm

Shows
P ：290mm
frame depth （For frame type E）（Separator）

Shows dimension：See standard spec.（ Z stands for special spec.）
Type

L：Mini pleats M：Separator

Standard speciﬁcation
Model

Dimension（mm）
H×W×D

ACGL-10-R -E-※
ACGL-20-R -E-※
ACGL-10-RS-E-※
ACGL-20-RS-E-※
ACGL- 7-S -E-※
ACGL-14-S -E-※
ACGM-56 -E42-※
ACGM-56H-E42-※

610× 610× 75
610×1220× 75
610× 610× 65
610×1220× 65
610× 610× 50
610×1220× 50
610× 610×290
610× 305×290

Type

Mini Pleats

Separator

Rated face velocity Rated air volume（m/s）（m3/min）
10
20
10
20
7
14
56
28

0.5

0.35
2.9

Pressure drop（Pa）

Gas removal eﬃciency（％）

About 40
About 30

About 90

About 15
About 98

About 90

Weight
（kg）
5.5
10.5
5.0
9.5
4.0
7.0
16.5
9.5

※Gas removal eﬃciency varies according to the used airspeed, type of gas being removed and temperature, so consult for speciﬁc situations.

Materials and Temperature / Humidity
Type
Mini Pleats
Separator

Frame
E
E＊＊
K
E＊＊

Frame
Bending aluminum
Extruded aluminum
Polyester laminated plywood
Extruded aluminumMedia
GranularactivatedcarbonMaterials
Separator

RibbonSealant̶

Hot melt

Polyurethane
resin

Aluminum̶Dimension available
Shape
Mini pleats
SeparatorD
50、65、75290H
150〜1,220※1
150〜 610※1 It will be 2pcs connected speciﬁcatior when height over 760mm.

19

Q
1,500
915

Temp. & Hum.（Recommend）
Temperature（℃） Humidity（%/RH）
0〜40

30〜90

3. Products
PureChemix GMedia type and target gases
Media Type
O
A
B
G

Media
Base material
Additive̶Granular activated carbon
Granular activated carbon Potassium carbonate
Granular activated carbon Phosphoric acid
SpecialGranular activated carbon

TypeFor organic gases
For acids
For bases removal
Aldehyde gas

Target gases
ExamplePhtharic ester（DOP、BBP）、Siloxane、OZ one、Phosphoric ester（TBP）、Teluene
Sulfar oxide（SOx）、Hydro chloric oxide、Hydroﬂuoric acid、Boron
Ammonia、Amine
Formaldehyde、Acetaldehyde

Speciﬁcation
Gas removal eﬃciency（Sample）
Element
Type
Organic gases removalO

For acids removal

A

B

For bases removalG

For removal of aldehyde gas

Name

Chemical formula

Organic substance
Fluoride ion
Nitrite ion
Nitrate ion
Sulfate ion
Boron
Acetic acid
Formic acid
Ammonium ion
Formaldehyde
Acetaldehyde−
F-

NO2NO3SO42B
CH3COOH
HCOOH
NH4+
HCHO
CH3CHOMini pleat
Concentration（μg/m3）
Up Stream Down Stream
8.4
0.05
1.0
0.02
0.5
＜0.01
0.1
＜0.01
0.2
0.01
0.3
0.01
9.3
0.20
0.15
＜0.01
3.5
＜0.05
98
＜1
48
＜4

Face Velocity vs. Pressure Drop
（representative value）

Eﬃciency
（％）
99
98
98＜
90＜
95
97
98
93＜
99＜
99＜
92＜

Separator
Concentration（μg/m3）
Up Stream Down Stream
0.4
10.5
0.03
1.0
0.01
0.6
＜0.01
0.1
＜0.01
0.2
0.01
0.3
0.28
8.9
＜0.01
0.12
0.15
4.5
−
−
−
−

Eﬃciency
（％）
96
97
98
90＜
95＜
97
97
92＜
97
−
−

GC-MS
IC
ICP-MSIC
HPLC

Structure drawing of ﬁlter（Separator type）：ACGL‐10‐R‐E‐※：ACGL‐10‐RS‐E‐※：ACGL‐7‐S‐E‐※：ACGM‐56‐E42‐※100

Separator

Media

Frame

50

Pressure drop（Pa）

Measaring
method20

Sealant
10

Structure drawing of ﬁlter（Mini pleats type）
5

Ribbon
Media
2

Frame
1
0.1

0.2

0.5

1.0

2.0

3.0

5.0

10

Air volume（m/s）

Sealant

20

3. Products
Thin type chemical filter

Thin type chemical filter（Thin type for processing circulation air）

Model

NECS−□−□−□−□□（Ion exchange type）

Add Ｚ for special modelShows frame depth 25：25mm
Media No. A ： For acids

B ： For bases

Frame

E ： Bending aluminumShows dimension：See standard spec.（ Z stands for special spec.）

NACG−□−□−□−□□（Granular activated carbon type）

Add Ｚ for special modelShows frame depth 25：25mm
Media No.
Frame

O： For organic gas

E ： Bending aluminumShows dimension：See standard spec.（ Z stands for special spec.）

Standard speciﬁcation
Model

※1
Dimension（mm）
H×W×D

Rated face velocity（m/s）

Rated air volume（m3/min）

Pressure drop（Pa）

Gas removal eﬃciency※2（％）

Weight（kg）

NECS-7-E-A-25
NECS-7-E-B-25
NACG-7-E-O-25
NACG-7-E-A-25
NACG-7-E-B-25
NACG-7-E-G-25

610×610×25
610×610×25
610×610×25
610×610×25
610×610×25
610×610×25

0.35
0.35
0.35
0.35
0.35
0.35

7
7
7
7
7
7

About 10

About 90

About 2.5

About 10

About 90

About 2.5

About 15

About 90

About 2.5

About 15

About 90

About 2.5

About 15

About 90

About 2.5

About 15

About 90

About 2.5

※1 Other dimesions are available.
※2 Gas removing eﬃciency depends on air velocity, type and temperature of removing gas.

Materials and Temperature / Humidity
Media
Granular activated carbon、Ion exchange resin

Materials
Frame
Aluminum

Dimension available
D
25

21

H
150〜610Q
150〜760

Sealant
Polyurethane resin

Temp. & Hum.（ Recommend）
Temperature（℃） Humidity（%/RH）
0〜40
30〜90

3. Products
Thin type chemical filter

Media type and target gases
Media Type
NECS

NACG

Media
Additive／Functional group
Quaternary ammonium group
Sulfone acid group

Target gases

A
B

Base material
Polyethylene resin
Polyethylene resin

O

Granular activated carbon̶For organic gases

A
B
G

Granular activated carbon
Granular activated carbon
Granular activated carbon

Potassium carbonate
Phosphoric acid
Special adhesive

Acidic gas
Alkaline gas
AldehydeType
For acids
For bases removal

ExampleSulfar oxide（SOx）、Hydro chloric oxide、Hydroﬂuoric acid, Boron
Ammonia、Amine
Phtharic ester（DOP、BBP）、Siloxane、OZ one、
Phosphoric ester（TBP）、Teluene
Sulfar oxide（SOx）、Hydro chloric oxide、Hydroﬂuoric acid、Boron
Ammonia、Amine
Formaldehyde、Acetaldehyde、Toluene

Speciﬁcation
Gas removal eﬃciency（Sample）
TypeA

For acids removal

BOG

For bases removal
Organic gases removal
For removal of aldehyde

Element
Name
Nitrite ion
Sulfate ion
Boron
Ammonium ion
Organic substanceFormaldehyde

Chemical formulaNO2SO42B
NH4+
̶
HCHO

Concentration（μg/m3）
Up Stream
Down Stream
＜0.2
2.5
0.2
3.1
5
72
0.4
14.0
＜0.1
66.0
＜0.2
120

Face Velocity vs. Pressure DropEf ﬁciency
（％）
92＜
93
93
97
99＜
99＜

Measaring method
IC
ICP-MS
IC
GC-MS
HPLC

：NACG-7-E-O-25
NECS-7-E-A-25：
NECS-7-E-B-25

20

Pressure drop
（Pa）

10

5

2

1

0.1

0.2

0.5

1

2

Air volume
（m/s）

22

4. Technical term explanation

1. Technical term for gas concentration（1）%, ppm, ppb, ppt
These terms represent ratio of volume / volume, mass / mass and others.
For gas concentration in atmosphere, these generally represent volume of target gases / volume of atmosphere%（per cent）：10-2
ppm （parts per million） ：10-6
ppb （parts per billion） ：10-9ppt （parts per trillion） ：10-12Preﬁx of unit
Multiplier
1012
109
106
103
102
10-2
10-3
10-6
10-9
10-12

（2）mg/m3, μg/m3, ng/m3, μg/L, ng/L, pg/L
These terms represent mass / volume.
For gas concentration in atmosphere, these represent volume of target
gases / volume of atmosphere
mg/m3 ＝ μｇ/Ｌ
μｇ/m3 ＝ ng/L
n g/m3 = pg/L

Preﬁx
T
G
M
k
h
c
m
μ
n
p

Name
T（Tera）
G（Giga）
M（ Mega）
k（Kilo）
h（Hecto）
c（Centi）
m（Milli）μ（Micro）
n（Nano）
p（Pico）

2. Conversion method of gas concentration（ppb⇔μg/m3）
Conversion between concentration of volume / volume and concentration of weight / volume can be calculatedwith calculation below by using molecular weight andX: Figure at ppb unit
molar volume of ideal gas at 0℃, 1atm.
＝
Y〔μg/m3〕Y: Figure at μg/m3 unit
M
: Molecular weight of target gas
22.4 : Molar volume of ideal gas at 0℃、1atm
K: Correct coeﬃcient by temperatureT: Temperature of atmosphere（℃）

X〔ppb〕
×M〔g/mol〕
22.4〔L/mol〕
×K

K＝（273＋T）/273

Conversion example of gas concentration（at 23℃）
Name
Fluoride ion
Chloride ion
Nitrite ion
Nitrate ion
Sulfate ion
Boron
Ammonium ion
TolueneTartet gases
Chemical formula
FCLNO2NO3SO42B
NH4+
C6H5CH3

Molecular weight
19.0
35.5
46.0
62.0
96.0
10.8
18.0
92.0

1ppb→Yμg／m3

1μg／m3→Xppb

0.78
1.46
1.89
2.55
3.95
0.44
0.74
3.79

1.28
0.68
0.53
0.39
0.25
2.25
1.35
0.26

※T=at 23℃

3.SV value（ Space Velocity）
SV represents ventilated air volume per volume of adsorbent（see calculation below）, to show conditions of adsorbent loaded
type chemical ﬁlter. When SV is lower, this means ventilated air contact to adsorbent longer, so removal eﬃciency of the ﬁlter
become higher. In case of processing same concentration gases, service lifetime become longer because ventilated air volume
is smaller（Correspond to air velocity for mini-pleats type chemical ﬁlter）.
＝
SV〔1／ｈ〕

ventilated air volume〔m3／h〕
filled volume of adsorbent〔m3〕

SV should be small when processing high concentration gases, high eﬃciency is required and long lifetime is needed（Pleaserefer us for details）.

23

ー

○

ー

○

ー

○

○

○

ー
○
○
ー
○
○ features○ー5. NACG
Target gas
and

○
○

○
ー

○
○

ー
ー

○
○

○
○

ー
○

○

ー

○

ー

○

○

○

ACGL

○

○

○

ECSL

NECS

ー

○

○

ー

※：除去対象ガスに適したろ材を選択します。

MUKI Inspection Devices

Ion Chromatograph（IC）

Gas chromatograph-mass spectrometer（TD-GC-MS）◎ Measurement of acid, alkali, and organic acid density in liquid（SO42-、NH＋4、
CH3COO-etc.）◎ Measurement of acid, alkali, and organic acid density in air◎ Measurement of acid, alkali, and organic acid removal eﬃciency of the ﬁlter◎ Measurement of acid, alkali, and organic acid density dissolution volume from the component◎ Measurement of organic matter density in air（siloxane / DBP / DOP, etc.）◎ Measurement of organic matter removal eﬃciency of the ﬁlter◎ Measurement of amount of organic matter generated from the ﬁlter and the component

Inductively-coupled plasma mass spectrometer（ICP-MS）

Silicon wafer analyzer gas chromatograph-mass spectrometer（WTD-GC-MS）◎ Measurement of metal composition density in liquid（B, P, Ca, Cu, Al, etc.）◎ Measurement of metal composition density in air◎ Measurement of metal composition removal eﬃciency of the ﬁlter◎ Measurement of amount of metal composition generated from the ﬁlter◎ Measurement of amount of organic matter adhering to the surface of wafer◎ Determining the relationship between organic matter density in the air and amount of wafer contamination◎ Measurement of amount of organic material generated from the ﬁlter

24

6. Handling Manual
1. During transport

When transporting filters, please exercise care regarding the following matters.
（1）When lifting the filter, securely hold the carton with both hands, making sure the direction markings（this side
up, etc.）on the box are followed. Do not carry it on your shoulders.
（2）When unloading the filter, set it down gently. If dropped, the frame or filter media may be damaged. If dropped
by accident, open the carton and check for damage.
（3）When loading the filter on a truck, etc., never place the carton on its side. Place the carton according to thedirection markings clearly displayed on the carton. Do not stack more than 3 cartons high.
（4）Although the filter is designed to withstand vibrations while in transit by truck, etc., avoid traveling on roughroads for an extended period. Keep the product dry. Use trucks which are equipped to prevent the product fromgetting wet or from rain.

2. Storage

When storing the filters, please exercise care regarding the following matters.
（1）Do not place the carton directly on the floor. Use a pallet to allow space between the filter and the floor.
（2） Avoid high temperatures and high humidity, and store under normal humidity and temperature conditions（storage temperature 0-40 ℃, storage relative humidity 30-90%, no condensation）. Store in a well-ventilated
warehouse without leaks, and avoid direct sunlight and contact with water.
（3）Never place the carton on its side. Place the carton according to the direction markings clearly displayed on the
carton. Do not stack more than 3 cartons high.
（4）Store the filter in its original carton. If the filter has been opened, repack the filter in a PE bag, and tightly seal
the bag.
（5）Filters for out gas（Low boron, Nouvelle）can be contaminated by outside air. Do not leave open filters exposed
for an extended period of time.
（6）The storage limit is 1 year. If a filter has been stored for over 1 year, check its performance before use.

3. Installation

When installing the filters, please exercise care regarding the following matters.

（1）When removing the filter from the carton, lift the carton upward as illustrated in the
figure on the right to avoid possible damage to the filter.
（2）Damage to the filter pack often occurs when the filter is moved or installed. Even if
there is a media guard such as a mesh lath, grasp only the frame.
（3）Never sit or stand on the filter. When the filter is installed in a hard to reach place, it
may be easy use it as a stepping stool, but it is easily damaged.
（4）Do not climb on the filter as this will cause damage or breakage, and may also resultin physical injury.
（5）When installing the filter in a horizontal chamber, be sure to install the filter so thatthe top of the media will be in the upward direction.
（6）Install filter according to the displayed air flow direction, as instructed.
（7）When fastening a filter with a gasket, tighten all the gaskets evenly. The gasket
should be tightened to approximately 2/3 of its depth. Do not remove the filter once
installed, except for replacement.（if crimping is repeated, durability of the gasket
will be reduced, and may leak.）（8）In some cases, the filter is shipped in a PE bag or a PE sheet is attached to the filer
to avoid contamination until ventilation（use）. Please remove the PE bag or PE sheet before use. If ventilated iscarried out without removing the PE bag or sheet, the filter or fan may be damaged.

4. Use（1）After installation of the filter, let it idle.
（2）Turn on/off airflow gradually. Do not abruptly change the airflow on or off.
（3）Once ventilation begins, keep a record of the initial pressure drop.
（4）Use at an airflow which is lower than it is rated for. Even at a lower rated airflow, damage may occur if air hits
the filter locally. Use rectified air for ventilation.
（5）To maximize the efficiency of out gas countermeasure filters（Low boron, Nouvelle）, use with a chemical filter isrecommended.

5. Disposal

Discard filter as industrial waste.

25

MEMO

26

This catalog is subject to change whthout any prior notice

NIPPON MUKI CO.,LTD.

2012.3.2000（耕）NM 137