Comments fromuser businesses

CompanyA

Application

Evaluation

The use of aeroFIX is expanding to meet workplace needs.

Issue

Achieved improved work eﬃciency
and quality through stable workpiece lifting

Lifting

UseSolution

Because laser annealing involves directing theLifting stage of excimer laser
annealing equipment forsmall and medium-size displays

laser onto the workpiece, focusing is diﬃcult.
We wanted the laser to contact the workpiece
when it is lifted, however it was not possible tosecurely hold the workpiece with conventional

The introduction of aeroFIX produces precise,stable lifting that makes focusing easy. Theﬁne pores deliver powerful partial chucking,resulting in a large improvement in workeﬃciency.

chucks.

The strength of NanoTEM as a venture company is its
ability to provide ﬁne-tuned services, such as changing thecomposition of a product according to the application.

Lifts, Holds and Carries

Laser beamLaser beam
(poly-Si formation process that requires lifting)Thin substrate or other productaeroFIX

Glass substrate
StageCompanyB

Application

CompanyC

Application

Holding stage used in artiﬁcial
sapphire grinding for LCDand LED products

There are many other interesting products in addition toaeroFIX. In particular, we are also interested in the grindingwheels.

Excellent technical capabilities
helped us resolve all issues andturn our attention to new challenges.

SuctionFilm holding stage fornext-generation displays(OLED)

Use

In addition to ﬂat surface suction, there are many advanced
technology products such as suction rollers and precision
lifters that may be able to use in other processes.

WorkpiecesCompanyD

process of grinding. However, the wax needs
to be removed and cleaned which involves timeand trouble.
Ingot,Sapphire
substrateholding without the use of wax. Eliminating thewax-related work resulted in a large increase inwork eﬃciency and cost savings.
Removal of wax is
not necessary.

Workpieces
Wax
Stage

Application

Suction,grinding

Evaluation

We intend to work together, starting with joint technicaldevelopment.

Vacuum chucks forgeneral grinding

空気

VacuumIssue

SolutionWith conventional vacuum chucks, the ﬁlm
material would be sucked into the air holes on
the suction surface, causing sagging andquality problems.
Thin substrate,ﬁlm, etc.

Grinding
Workpieces

Airpassesout.

GrindingWorkpieces

The reasons for introducing aeroFIX were thefollowing: (1) partial chucking without sagging,electricity, (5) high cost performance. It has
performed extremely well in all these areas.
Workpieces

Does not sag

Stage

Air passes out.

VacuumIssue

Solution

Our company develops and sells grinding
equipment, however holding the workpieces
during grinding has been a diﬃcult issue for us,and we felt the need to develop products
utilizing new technologies.

We viewed the actual NanoTEM equipment andtechnologies, and were highly impressed with
their technical capabilities and originality - moreso than we expected, in fact. We felt that
there is much future potential for the use ofporous alumina and the technologies developed
for grinding in technologies (for ﬁxed abrasivegrains) that are not currently in the mainstream.

Free sample lending

NanoTEM has prepared free samples that are available to borrow. They can be tested immediately in anenvironment where compressed air can be used. Please request a sample from our companyʼs website.
Customers can also bring products to our company for tests.

Sales of regular products

We sell regular products in a range of predetermined sizes. For details, please contact us via our website.

The information in this catalog may be changed without notice. Unauthorized reproduction of the contents of this catalog is prohibited.

Contact

NanoTEM Co. Ltd.,
3-2-10 Jooka, Nagaoka-shi, Niigata, 940-0021
TEL：0258-22-6725 FAX：0258-22-6726 E-mail：tech@nano-tem.com
2018.2High precision porous ceramic vacuum chuck(2) capable of holding large areas, (3)produces no dust, (4) produces no static

空気

Workpieces

Creative ideas with high future potential,
and the possibility ofcollaborative technical development

Information about freelending of samples andsales of regular products

Solution

Air for suction

Film is lifted by air
from minute pores

Use

The introduction of aeroFIX achieved stableaeroFIX

Chucks ﬁlm
without sagging

Evaluation

Wax is used to hold sapphire substrates in theaeroFIX

Evaluation

Use

Air for lifting

Issue

Because wax is no longer necessary,
we were able to eliminate processes
and succeeded in improving work eﬃciency.

Grinding

Air for lifting

http://nano-tem.com/en/aeroFIXLifts, Holds and Carries

6 advantages of aeroFIXHigh precision porous ceramic vacuum chuck
aeroFIX

1

Use as an antistatic material!
Resolves contamination issues forultra-thin PCB and other workpieces!

Because this product does not carry or discharge static electricity,
the addition of an ionizer or other neutralizing equipment is notnecessary. This makes it possible to dependably handle precision
product workpieces.

With improvements in miniaturization and high-precision technologies,

A solution tocontamination issuesNo ionizer requiredand higher performance of solar cells, LEDs, semiconductors, LCDs,
organic EL, PCBs, and a broad range of other products, there isworkpieces

growing need for vacuum chucks that deliver higher levels of precision and performance.

Aluminum, stainless steel, etc.
aeroFIX

Can fasten thin items
without deforming them.

0.5μm

Original technology that enables partial chucking.

Photo taken with an electron microscope

aeroFIX achieves "partial chucking" that can securely fasten precision partsand other workpieces which cover only a part of the suction surface.
This is made possible by the 2μm pores that are produced by an original
NanoTEM material that contains alumina, and by our original sintering
technology.
It is no longer to necessary to change the chuck for each diﬀerent workpiece.

Comparison of characteristics

Chucking performance that protects the quality ofprecision workpieces.
Because aeroFIX pore sizes are so small and uniform, it is possible to prevent
workpiece deformation and also to prevent loss of suction force caused byclogging with dust.
Because complete sintering is performed during the manufacturing process,there is no dust produced from inside the product, preventing eﬀects on theservice environment and eliminating static electricity.

aeroFIX product lineup
Flat type
Roller typeG8 size also available
Any shape is OK.

Conventional
through-holeproductSurface resistance◎×

Use with thin workpieces◎×Partial chucking◎×

Suction strength◎△※

Use in wet environments◎◎※

Use in high-temp. environments◎

×Cost◎△※: × when workpiece is small

We can produce sizes and shapes to meet a wide range of customer requests.

ColorBlackHardness (HRH scale)

90

Pore size (μm)

2Porosity (%)

40

Flatness andparallelism (μm)

Target 20, commit 30

Bending strength (MPa) 50(for a square 500 mm on a side)

Permeation flow (L/min) 2 or less(when vacuum is measured)

Fasten any
workpiece ofany size!

Improved workeﬃciency

OK in
wet environments

workpieces

Young s modulus (GPa） 50

3Reduce the risk ofworkpiece contamination!
Achieve non-contact ﬂoating transport!

The workpiece is lifted up by theﬂoating unit and can be freely moved
on the vacuum pads with thesmallest of force.
This is the advanced NanoTEM
technology that individually controls
the air supply and vacuum suction to
produce positive and negative
pressure.
A solution tocontamination issues

Thermal conductivity

1

Watch the video below for an introduction to
the aeroFIX features and speciﬁc examples of how it is used.

http://nano-tem .com /product/aeroﬁx.htm l(W/(m-K))

Density (g/cm3)

2.5 - 2.7

Surface resistance (Ω/sq)

10 6 - 10 9

Coefficient of thermal
expansion (10-6 /K)

7-8

Reflectivity (%)

5-6

Primary material

Alumina

5Space savings!
The suction rolls!

The suction rolls allow chucking andhigh-speedtransportofﬁlm
materials without leaving suction
marks on them.
Because fastening at any part ispossible, this product delivers spacesavings on plant production lines.
Improved workeﬃciency

Space savings

vacuum

Improved workeﬃciency[Speciﬁcations] Black 2 μm regular typeaeroFIX

A single unit that can be used witha wide range of workpiece sizes!

a e ro F IX

aeroFIX

workpieces

Partial chucking is possible!

Cost savings

The original NanoTEM ceramic sintering method that controls the eutectic
reaction of the primary agent and auxiliary agent produces uniform 2μm poresthat were impossible with conventional technologies, producing 40% porositythat achieves both light weight and high strength. It can be used in a wet or dryenvironment, also in a high temperature environment up to 150℃.

Improved workeﬃciency

workpieces

Can be used in wet and dry environments and with a wide range ofworkpiece sizes.
It is not necessary to maintain a lineup of shapes and sizes for diﬀerent
workpieces, producing cost savings and improved work eﬃciency.

×30,000

Cost savings

poorly suited to fastening thin items

2aeroFIX is a next-generation vacuum chuck that was
created from original NanoTEM technologies.

This product solves the issues of deformation, sagging, strain, andedge warping that plague aluminum, stainless steel, and otherconventional vacuum chucks.
The use of ultra-ﬁne micron-order pores and our original evacuation
system allows dependable handling of thin, delicate workpieces.

aeroFIX

utilizes our original ceramic sintering technology to resolve the issues facing conventional

What is aeroFIX?

Perfect for ﬁlms and other thin,delicate workpieces!

Conventional chucks

The aeroFIX developed by NanoTEM is a completely new type of vacuum chuck thatthrough-hole type vacuum chucks!

4

High-performance, high-precision,
uniform suction force!

6

Just place it onto
your current equipment!
Convenient & cost-saving!

Simply place the ﬁxed top plate onto the vacuum chuck that you
currently use to deliver high performance and function.
No fastening parts are required.
Cost savings

SimpleaeroFIX
Existing table

See the reverse side forcomments from user companies.