Nanopositioning for Microscopy
F A S T, C O M P A C T, T O T H E N A N O M E T E R

W W W. P I . W S

Nanopositioning for Microscopy
CONTENT
Precision Positioning is the Key Element
in all Types of Microscopy .......................................................................	2

Routine Widefield Microscopy .................................................................	3
Life Cell Imaging in Research Microscopy ...............................................	4
Multiphoton Fluorescence Microscopy ...................................................	5
Light-Sheet Fluorescence Microscopy .....................................................	6
Super-Resolution Fluorescence Microscopy ............................................	7
Stereo Microscopy ...................................................................................	8
Digital Slide Scanning .............................................................................	9
Atomic Force Microscopy ...................................................................... 	10Scanning Electron Microscopy .............................................................. 	11Industrial Inspection .............................................................................. 	12

Image: Shutterstock

3-D Surface Inspection ........................................................................... 	13

Find Your Piezo Z-Nanopositioner .................................................................................	14

PIFOC® Objective Scanners ............................................................................................	15
Fast PIFOC® Objective Scanning Systems .....................................................................	16
Long Travel PIFOC® Objective Scanning System ...........................................................	17
High-Dynamics and High-Load PIFOC® Objective Scanners ..........................................	18

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W W W. P I . W S

Configuration Diagram for PIFOC® Objective Scanners with Standard Aperture ........................................................................... 	19Configuration Diagram for PIFOC® Objective Scanners with Large Aperture ................................................................................. 	20Configuration Diagram for P-726 PIFOC® ........................................................................................................................................ 	21

Sample Positioning in Several Axes ...............................................................	
22 - 23
Sample Positioning in Z .........................................................................................	24
Sample Positioning for Widefield Microscopy		Compact and Fast .....................................................................................	25

		

Compact and Fast with Nanometer Resolution ...................................... 	26

		

Parallel-Kinematic Designs for Positioning in up to 6 Axes ..................	27

Sample Positioning for Super-Resolution Methods
		

28 - 30
Tracking and Scanning .......................................................................	

Accessories for Sample Positioning Stages ...............................................................................................................................	31

Single Channel Digital Controllers .............................................................................................................................................. 32
Multi-Channel Digital Controllers ..........................................................................................................................................  33-34

The PI Group .................................................................	35
From 1-off to Series: OEM Customers Benefit
From Maximum Flexibility ...........................................	36
Global Service and After-Sales ....................................	37
The PI Group Milestones .........................................	38-39
PI Worldwide .................................................................	40

I2

MOTION|POSITIONING

Precision Positioning is the Key Element
in all Types of Microscopy
High-resolution microscopy techniques must be capableof accurate and reproducible positioning of imaging elements or samples. Applications range from precise z-focus
positioning of light microscope objectives in the depths offield, to exact positioning of tiny biological samples for 4Pi
Resolft 2-Photon super-resolution fluorescence microscopy. Also in atomic force microscopy (AFM), electron
microscopy (SEM and TEM) and correlative microscopy,
PI´s versatile nanopositioning solutions greatly support
even the most demanding positioning tasks.

Depending on the lateral and axial resolution powerof the microscopy technique, bidirectional positioning must be accurate in a range of a few hundred
nanometers – as in routine widefield light microscopy – or only a few nanometers – as in super-resolution fluorescence microscopy. Here, PI’s numerous
nanopositioning solutions come into play. PI provides reliable precision positioning solutions basedon piezo flexure, PiezoWalk®, piezo stick-slip, orparallel-kinematic drive technology.
This brochure provides an extensive overview of
the nanopositioning technology and products recommended and offered by PI for any microscopy
technique and application. Use cases are presented
ranging from routine widefield microscopy forstained tissue slices to several super-resolution
fluorescence microscopy techniques, to AFM, toSEM, and to industrial microscopy inspection.
PI’s superior nanopositioners and controllers moveyour sample or microscope element to the rightplace – reliably and precise, always.

2

Have a look at PI solutions for microscopy on the
PI YouTube channel www.youtube.com/user/phyinst

W W W. P I . W SRoutine Widefield Microscopy
Examination of Stained Tissue Slices on Slides

When analyzing tissue samples with a motorized microscope, an accurate autofocus in the depth of field is crucial for interpretable images. Reliable diagnostic resultsof histological slide, blood smears, and gynecological
pap smears depend directly on the performance of the
microscope system. PI offers ideally matched components for positioning the objective in Z direction as wellas the sample in the X and Y directions.

To ensure depths of field between about 115 µm (4×) andabout 800 nm (100×), the objective z-scanners need to bepositioned over travel ranges between 100 and 400 µm
with a bidirectional position repeatability of 200 nm andin settling times of the order of 20 ms.
Typically, the lateral microscope resolution is in a range of ≥250 nm. Therefore, positioning samples in XY
requires a minimum incremental step size and a bidirectional position repeatability in a range of 100 to 200 nm.

Tasks

PI Solutions

Positioning Objectives in Z – for Autofocus

PIFOC® Objective Scanners for focusing and scanningin Z with nanometer precision>> page 15 et seq.

Positioning Samples in XY – for Sample ScanningU-780 PILine® Piezo Ultrasound Stage System>> page 26
Customized solutions for sample positioning in uprightmicroscopes available on request.
3

MOTION|POSITIONING

Life Cell Imaging in Research Microscopy
Fluorescence, Widefield, Laser Scanning, and Two-Photon Fluorescence Microscopy

The examination of living cells provides fundamental
insights into intercellular processes, such as mitosisor the transport of protein molecules or membranecomponents, and enables investigation of metabolic processes. Different microscopy techniquessuch as fluorescence, widefield, or laser scanning areused for this purpose. They benefit from nanometer
precision positioning of PI motion systems.

In Total Internal Reflection Fluorescence Microscopy(TIRFM) the electromagnetic field of the laser beam
penetrates the sample volume and forms an evanescent field with a penetration depth between 100 to
200 nm. As a result, a better Z resolution is achieved,
which typically is in the range of 100 – 200 nm whencompared to about 500 nm from other microscopic
techniques.

For Z stacking, settling times of <10 ms in a settlingband of a few nanometers are required over a travel
range of several hundred micrometers in Z. Typically, positioning samples in XY needs a bideractional
accuracy of 100 nm or better in a range of 135 mm ×85 mm of travel.

Image: GATTAquant / PI

Tasks

PI Solutions

Positioning Objectives in Z

PIFOC® Objective Scanners for focusing and scanningin Z with nanometer precision >> page 15 et seq.

Positioning Samples in XY

U-780 PILine® Piezo Ultrasound Stage System >> page 26
Customized solutions for sample positioning in upright microscopes
available on request.

Positioning Samples in Z

P-736 PInano® Z Microscope Scanner >> page 24
P-737 PIFOC® Sample Z Positioner >> page 24

Coupling the Laser Beam for Total
Internal Reflection Fluorescence(TIRF) Microscopy

Q-545 Q-Motion® Precision Linear Stage
High Forces and Small Design Due to Piezo Motors
Only 45 mm in width
Incremental sensors with position resolution
n Vacuum-compatible versions available
n Push/pull force 8 N
n XY combinations without adapter plate possiblennLearn more ››4

W W W. P I . W S

Multiphoton
Fluorescence Microscopy
For Deep Tissue Examinations

Two-photon (or multiphoton) excitation microscopy
is preferably for experiments that require deep penetration of excitation light into living tissue or intact
animal specimens. For this reason, laser excitation
light is used at double the wavelength to increase thedepth of penetration of infrared light into the strongly scattered tissue. Objective positioning systems
with greater travel ranges are required for this purpose. Objectives or samples need to be positioned
in Z with a settling time of <20 ms in a settling bandof ±200 nm and a travel range of some millimeters.

Tasks

PI Solutions

Positioning Objectives in Z

ND72Z2LAQ PIFOC® Objective Scanning System >> page 17
Customized long travel Voice Coil PIFOC® available on request.

Positioning Samples in XY

U-780 PILine® Piezo Ultrasound Stage System >> page 26
Customized solutions for sample positioning in uprightmicroscopes available on request.
P-545 PInano® XY(Z) Piezo System >> page 29
M-545 Microscope XY Stage >> page 25

Positioning Samples in Z

P-736 Pinano® Z Microscope Scanner >> page 24
P-737 PIFOC® Sample Z Positioner >> page 24
P-545 PInano® XYZ Piezo System >> page 29

5

MOTION|POSITIONING

Light-Sheet Fluorescence Microscopy
Planar Illumination for Live Imaging

Image: Shutterstock

Light sheet fluorescence microscopy (LSFM) is atechnique used for 3-D and live imaging of large
specimens over an extended period of time. It uses
a unique planar illumination approach which isorthogonal to the observation direction that minimizes photobleaching and phototoxicity of the living
specimen.

To examine small organisms such as a zebrafish inagarose gel, the samples are positioned to a few
millimeters in XY with a bidirectional repeatabilityof 100 nm.

Tasks

PI Solutions

Positioning Objectives in Z

PIFOC® Objective Scanners for focusing andscanning in Z with nanometer precision>> page 15 et seq.

Positioning Samples in XY

P-620 – P-629 PIHera Piezo Linear Precision
Positioner >> page 28

6

W W W. P I . W SSuper-Resolution Fluorescence Microscopy
Surpass the Diffraction Limit in Living Cell Imaging

A number of super-resolution techniques allow thecapture of images with a higher resolution thanthe diffraction limit of light. Techniques such as
Scanning Near-Field Optical Microscopy (SNOM), Stimulated Emission Depletion Microscopy (STED), 4PI
Microscopy, Stochastic Optical Reconstruction Microscopy (STORM), and Structured Illumination Microscopy (SIM) have achieved improved lateral (XY)
resolution down to tens of nanometers. These new
approaches have created unprecedented opportunities for investigating the structure and function ofliving cells.
Positioning solutions in Z have typical travel rangesof 100 μm to 400 μm with a settling time <10 ms
in a settling band of ±1 nm. The sample is usually
positioned 200 μm in three axes with a bidirectional
repeatability of 1 nm.
Image: Shutterstock

Tasks

PI Solutions

Positioning Objectives in Z

PIFOC® Objective Scanners for focussing and scanning in Z
with nanometer precision >> page 15 et seq.

Positioning Objectives in XY

P-612.2 XY Piezo Nanopositioning System
Compact, with Aperture
100 μm × 100 μm closed-loop travel range
Clear aperture 20 mm × 20 mm
n Compact: Footprint 60 mm × 60 mm
n Parallelkinematics for faster response times and higher multi-axis
accuracynnLearn more ››Positioning Samples in XY

U-751 XY Stage with Piezomotors
 ompact design: Only 32 mm in height, no lead screw ductsCor flanged motors
n Direct-measuring linear encoder with 100 nm resolutionn Self-locking, no heat generation at rest, no servo jittern Clear
aperture 78 mm × 78 mm (at maximum displacement
65 mm × 65 mm)
n Noncontact limit and reference point switchesnLearn more ››Positioning Samples in Z

P-541.Z / P-541.T Piezo Z Stages / Z and Tip/Tilt Stages >> page 28
M-227 High-Resolution Linear Actuator with DC Motor
Min. incremental motion 0.05 µm
Nonrotating end piecen Subnanometer resolution with optional piezo drivennLearn more ››P-736 PInano® Z Microscope Scanner >> page 24
P-737 PIFOC® Sample Z Positioner >> page 24

7

MOTION|POSITIONING

Stereo Microscopy
Examination of Whole Organs and Creatures

Some application fields require imaging of entire
organs or even living beings. Objective and sample
positioners that are designed for high loads and long
travel ranges of several millimeters are perfect forthis purpose.

Objective is not includedin scope of delivery.

Tasks

PI Solutions

Positioning Objectives in Z

Customized autofocus Z-scanner with ultrasound drive,
more information on request.

Positioning Samples in XY

U-780 PILine® Piezo Ultrasound Stage System >> page 26

Positioning Samples in Six Axes

H-811.I2 6-Axis Miniature Hexapod >> page 27

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W W W. P I . W S

Digital Slide Scanning
Digitize Your Glass Slides

Image: gettyimages

Digital slide scanners digitize samples on glass slides
at high speeds. For example, digital samples can beused for faster, more reliable, and more efficient
work in healthcare, research, and education.

Fast positioning of samples in X, Y with a positioning accuracy of 100 nm and variable travel ranges
is necessary, depending on the number and size ofthe inserted slides.

High-dynamics autofocusing requires a maximum
depth of field of 115 μm for 4x objectives, whichmeans a travel range in Z is typically 100 – 400 μm.
The settling time of objective positioners needs to be<10 ms in a settling band of ±200 nm.

Tasks

PI Solutions

Positioning Objectives in Z

P-725.xDD PIFOC® High-Dynamics Piezo Scanner>> page 18
P-726 PIFOC® High-Load Objective Scanner>> page 18
P-725KHDS PIFOC® Objective Scannerwith High Dynamics >> page 18

Positioning Samples in XY

U-780 PILine® Piezo Ultrasound Stage System>> page 26
V-738 PIMag® High-Precision XY Stage >> page 25

9

MOTION|POSITIONING

Atomic Force Microscopy (AFM)
In Combination with Raman or Scanning Near-field Optical Microscopy (SNOM)

Atomic Force Microscopy (AFM) delivers topographical information of the sample, e. g., minerals, polymer mixtures, composite materials, or biological tissue. Confocal Raman Imaging identifies the chemicalcomponents. Scanning Near-field Optical Microscopy(SNOM) is used for optical imaging with resolution
beyond the diffraction limit. All three methods canbe combined in one system (correlative microscopy),
thanks to the parallel-kinematic piezo stage with fast
response time and high multi-axis accuracy. Positioning accuracy of down to 1 nm and below is demanded
in all three axes.

Images: WITec

Tasks

PI Solutions

Positioning Samples in XYZCustomized solutions available on request.

Positioning Samples in XY

P-517 / P-527 Multi-Axis Piezo Scanner >> page 29

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W W W. P I . W S

Scanning Electron Microscopy (SEM)
Examination in UHV Environment

Electron microscopy allows investigation with extremely high lateral resolution down to a range of<1 nanometer. Demands on positioning systems
subsequently comprise respective resolution, additionally stages have to be nonmagnetic and UHV
compatible (10 –7 hPa). Based on these features,
positioning solutions from PI can also be deployedin Focused Ion Beam (FIB) systems and in combined
FIB/SEM machines.

Image: Dr. Reiner Ramlau, MPI for chemical physics of solid materials

Tasks

PI Solutions

Shifting Lenses or Apertures in XY

U-751 XY Stage with Piezomotors
 ompact design: Only 32 mm in height, no lead screw ductsCor flanged motors
n Direct-measuring linear encoder with 100 nm resolutionn Self-locking, no heat generation at rest, no servo jittern Clear
aperture 78 mm × 78 mm (at maximum displacement
65 mm × 65 mm)
n Noncontact limit and reference point switchesnLearn more ››Positioning Samples in XY

P-752 High-Precision Nanopositioning Stage ravel range to 35 μm
TResolution 0.1 nm
n Rapid responsen Highest linearity due to capacitive sensorsnnLearn more ››11

MOTION|POSITIONING

Industrial Inspection
Optical 3-D Surface Measuring Technology

The trend in surface inspection is moving towards
smaller and smaller structures that must be reproduced or resolved accurately at nanometer level.
Optical measuring processes are employed formany applications because they can be applied toalmost all materials and are also suitable for sensitive samples. Highly precise, confocal reproduction
principles can present the sample topography androughness structures not only qualitatively, but also
quantitatively using matching tactile measuringmethods that are described in many industry standards. Piezo-based positioning systems are making
considerable contributions in this field because they
offer nanometer precision and high dynamics.

Image: NanoFocus

Images: NanoFocus

Tasks

PI Solutions

Positioning Objectives in Z

PIFOC® Objective Scanners for focusing and scanningin Z with nanometer precision >> page 15 et seq.
P-620.1 – P-629.1 PIHera Piezo Linear Precision Positioner >> page 28

Positioning Samples in XYZ

P-541 / P-517 / P-561 / P-562 Tracking and Scanning for Super-Resolution>> page 28 / 29 / 30
 arallel kinematics for faster response times and higher multi-axisPaccuracyn Travel ranges to 300 × 300 × 300 µm
n Subnanometer resolutionn12

W W W. P I . W S

3-D Surface Inspection
White Light Interferometry

Image: Nikon

The contours and roughness of surfaces can be analyzed in real time at picometer resolution by employing noncontact, and nondestructive methods. For
this purpose, high-resolution camera systems are
combined with white light interferometry.

Fast and precise positioning of lenses is an important
requirement for detailed analysis of the surface andfor piecing individual measurement results together
to produce meaningful images.
The position of the lens must be matched accurately
to the individual image and only then is high-precision
3-D surface inspection possible.

Tasks

PI Solutions

Positioning Objectives in Z

PIFOC® Objective Scanners for focusing
and scanning in Z with nanometer precision>> page 15 et seq.

Positioning Samples in XY

L-731 Precision XY Stage >> page 25

Positioning Samples in Six Axes

H-811.I2 6-Axis Miniature Hexapod >> page 27

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MOTION|POSITIONING

Find Your Piezo Z-Nanopositioner
With Aperture

DOES ANOBJECTIVE OR
OPTICAL ELEMENT
NEED TO BE
POSITIONED IN Z?

yes

IS IT ALLOWEDTO MOVE THE
SAMPLECAREFULLY?

yes

ARE THEREANY SPACIAL
LIMITATIONS?

no

no

yes

IS Z
POSITIONING
OF THE SAMPLE
WITH ADDITIONAL
XY POSITIONINGREQUIRED?

no

IS A SETTLING
TIME OF <10 MS
REQUIRED?

no

yes

P-545
>> p. 29

WHICH TRAVELRANGE DO
YOU NEED?

CUSTOMIZEDSOLUTIONSON REQUEST

yes

no

WHICH TRAVELRANGE DO YOU
NEED?

WHICH TRAVELRANGE DO YOU
NEED?

100 µm

220 µmUp to 250 μm

Up to 500 μm

P-736>> p. 24

PD73Z2xOW>> p. 24

P-620.Z –P-622.Z>> p. 28

P-737>> p. 24

100 µm

400 µm2000 µm

18 µm

100 µm

400 µm

PD72Z1x>> p. 16

PD72Z4x>> p. 16

ND72Z2LAQ>> p. 17

P-725.xDD>> p. 18

P-726>> p. 18

P-725KHDS>> p. 18

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W W W. P I . W S

PIFOC® Objective Scanners
Focusing and Z-Stack Scanning with Nanometer PrecisionObjective scanners of the PIFOC® series offer high dynamics in positioning and scanning tasks. Well adapted solutions for Z focusingof the objective are available as standard products, also as system packages with controller and software. Like all piezo systems,
scanners are delivered precalibrated with measurement log.

P-725 PIFOC® Objective Scanners
with Long Travel Ranges up to 400 µm
System packages also available incl. QuickLock thread adapter,
controller and software >> page 16.

Significantly faster response and higher

n



n



n



n



n



n



n



lifetime than stepper- or DC motor drives
Nanometer precision and settling times
in the range of milliseconds

P-721 PIFOC® High-PrecisionObjective Scanners with Travel Ranges up to 100 µm
System packages also available incl. QuickLock thread adapter,
controller and software >> page 16.

In combination with capacitive sensors
highest linearity due to direct measuring
technology
High guiding accuracy due to zero-playflexure guides
Clear aperture up to Ø 29 mm
QuickLock thread adapters for easy
installation >> page 19
Spacers available to adapt additional
objectives without PIFOC® in thesame objective nosepiece, refer to>> page 19

Objective is not included in scope of delivery.
QuickLock thread adapter to be ordered separately according to >> page 19 et seq.
Recommended electronics >> page 32

Technology: PICMA® Multilayer Piezo Actuators
PICMA® actuators take advantage of the indirect piezoelectric effect and achieve highforces. They only need a small amount of installation space. At the same time, the
PICMA® actuators are very dynamic and can reach a position with an unprecedented
precision. Due to their ceramic insulation, PICMA® actuators exhibit high reliability
and climate resistance.
Learn more ››15

MOTION|POSITIONINGFast PIFOC® Objective Scanning Systems
High Dynamics Piezo Drive for Subnanometer Resolution

Fine positioning of objectives with sub-nm resolution

n



n



n



n



n



n



Direct metrology with capacitive sensors (depending on model)
Compatible with LabVIEW, µManager and MATLAB
All servo-control parameters can be changed during operation
Models with large aperture Ø 29 mm available
USB, RS-232, analog interfaces

PD72Z1x PIFOC®
Objective Scanning System with 100 µm Travel Range
PD72Z2x * PD72Z4x PIFOC®
Objective Scanning System with 400 µm Travel Range

Systems includen

PIFOC® Objective ScannernE-709 Digital Controller
QuickLock-Thread adapter M25 × 0.75 or M32 × 0.75 for PIFOC® with large aperture >> page 19 et seq.

n	

16

n

PIMikroMove® Softwaren

Drivers for LabVIEW, Matlab, C++ and more

Objective is not included in scope of delivery.
Further QuickLock Thread adapters available, see >> page 19 et seq.
Recommended electronics >> page 32 et seq.

W W W. P I . W S

Long Travel PIFOC® Objective Scanning System
Nanometer Resolution and Fast Step-and-Settle

ND72Z2LAQ PIFOC® Objective Scanning System 2000 µm
Nanometer Resolution and Fast Step-and-Settle
Complete system with digital controller, software, and M32
QuickLock thread adaptern USB, RS-232

n 

Sensor resolution 0.5 nm

n Highly dynamic step-and-settle for Z stacksn Further thread adapters as optional accessoryn Compatible with µManager, LabVIEW, and MATLABn Parameter changing during operationn 

Further QuickLock Thread adapters available, see >> page 19
Further electronics and accessories available on request.

Systems includen

PIFOC® Objective ScannernE-861 Digital Servo Controller
P-721.05Q QuickLock-Thread adapter M32 × 0.75n	n

PIMikroMove® Softwaren

Drivers for LabVIEW, Matlab, C++ and more

Nanometer precision and high feed force with PiezoWalk® walking drives
Several piezo actuators perform a walking motion in the PiezoWalk® walking drive that leads
to forward feed of a runner. Control of the actuators allows the smallest step and forward
feed motion at a resolution of well under one nanometer.
Learn more ››17

MOTION|POSITIONING

High-Dynamics and High-Load PIFOC®
Objective Scanners
Nanometer Resolution for Heavy Objectives

P-725.xDD PIFOC® High-Dynamics Piezo Scanner
Travel range 18 µm, shortest settling time <5 ms with microscope
objectiven 

Scans and positions objectives with sub nm resolutionn 

Parallel flexure guiding for minimized objective offset

n 

Direct metrology with capacitive sensors for highest linearityn 

Cost-efficient version with SGS sensors

n Compatible with MATLAB, LabVIEW and µManagern 

Outstanding lifetime due to PICMA® piezo actuatorsn 

QuickLock adapter for easy attachmentn 

P-726 PIFOC® High-Load Objective ScannerHighly dynamic positioning and scanningfor large objectivesn 

Resonant frequency 1120 Hz, 560 Hz with
210 g objective massn nTyp. settling time of about 6 msnTravel range 100 µm
Direct-metrology capacitive sensors for best linearity,
stability and control dynamicsn nResolution 0.3 nmnZero-play, high-precision flexure guide system for betterfocus stability

P-725KHDS PIFOC®
Objective Scanner with High Dynamics
Travel range 400 µm

n 

Step-and-settle 20 ms, with 400 g loadn Resonant frequency 120 Hz, with 400 g loadn 

QuickLock thread adapters up to M32

n 

18

QuickLock thread adapter to be ordered separately according to >> page 19 et seq.
Recommended electronics >> page 32

W W W. P I . W S

Configuration Diagram for PIFOC®
Objective Scanners with Standard Aperture
Aperture ≥ 21 mm, Depending on Thread Adapter
123

3 step configuration
Included in scope of delivery
To be orderd seperately

2

1
PIFOC® OBJECTIVE SCANNERS
WITH CAPACITIVE SENSORS
P-725.1CD
100 μm travel range

QUICKLOCKTHREAD ADAPTERS
P-721.11Q
M25 × 0.75
P-721.02Q
M26 × 0.75
P-721.03Q
M27 × 0.75
P-721.04Q
M28 × 0.75
P-721.05Q
M32 × 0.75
P-721.06Q
M26 × 1/36”
P-721.08Q
M19 × 0.75

P-721.CDQ
100 μm travel range
P-721.CLQ
100 μm travel range
P-725.4CD
400 μm travel range
P-725.4CL
400 μm travel range

PIFOC® OBJECTIVE SCANNING
SYSTEM WITH CAPACITIVE SENSOR
PD72Z1CAQ
100 µm travel range
PD72Z4CAQ
400 µm travel range

PD72Z4CA0
400 µm travel range

PIFOC® HIGH DYNAMICS PIEZOSCANNERS WITH CAPACITIVE SENSORS
P-725.CDD
18 μm travel range
P-725KHDS
400 µm travel range
SPACERS
FOR ADDITIONALOBJECTIVES
P-721.91Q
12.5 mm, M25 × 0.75

PIFOC® OBJECTIVE SCANNERS
WITH STRAIN GAUGE SENSORS
P-721.SL2
100 μm travel range

3
ELECTRONICS
FOR SYSTEMS WITH
CAPACITIVE SENSORS
Cost efficient:
E-709.CRG
Digital piezo controller,
1 axis, –30 to 130 V,
capacitive sensor,
benchtop device
For high dynamic
applications:E-709.CHG
Digital piezo controller,
1 channel, –30 to 130 V,
capacitive sensor, highpower output, benchtop
deviceFor highest demands:
E-754.1CD
Single-channel, digital
high-speed piezo controller for capacitive
sensors, with TCP/IP,
USB, and RS-232
interface

ELECTRONICS FOR
SYSTEMS WITH STRAINGAUGE SENSORS
E-709.SRG
Digital piezo controller,
1 axis, –30 to 130 V,
strain gauge sensor,
benchtop device

P-721.92Q
12.5 mm, M26 × 0.75
P-721.93Q
12.5 mm, M27 × 0.75
P-721.94Q
12.5 mm, M28 × 0.75

PIFOC® OBJECTIVE SCANNING SYSTEM
WITH STRAIN GAUGE SENSORSPD72Z1SAQ
100 µm travel range

P-721.95Q
12.5 mm, M32 × 0.75
P-721.96Q
12.5 mm, M26 × 1/36”
P-721.98Q
12.5 mm, M19 × 0.75

For all adapters and spacers see:

PIFOC® OBJECTIVE SCANNING
SYSTEM WITH OPTICAL ENCODER
ND72Z2LAQ
2000 μm travel range
Links to detailed product webpages (PIFOC / Controllers)
can be found on the respective product pages of this brochure.

MOTION|POSITIONING

ELECTRONICS FORPIEZOWALK®
NEXACT SYSTEMS
E-861
PiezoWalk® NEXACT®
controller, 1 axis,
benchtop device,linear encoder, USB
and RS-232 interfaces,
I/O, connecter forjoystick19

Configuration Diagram for PIFOC®
Objective Scanners with Large Aperture
Aperture up to 29 mm, Depending on Thread Adapter

123

3 step configuration
Included in scope of delivery
To be orderd seperately

2

1

PIFOC OBJECTIVE SCANNERS
WITH CLEAR APERTURE Ø 29 MM
WITH CAPACITIVE SENSORS®

QUICKLOCK THREAD
ADAPTERS FOR
PIFOCS® WITH CLEAR
APERTURE Ø 29 MM
P-721.05A
M32 × 0.75
P-721.11A
M25 × 0.75

P-725.1CA
100 µm travel range
P-721.CDA
100 µm travel range
P-725.2CA
250 µm travel range
P-725.4CA
400 µm travel range

P-721.02A
M26 × 0.75
P-721.03A
M27 × 0.75
P-721.04A
M28 × 0.75
P-721.06A
M26 × 1/36‘‘

PIFOC® OBJECTIVE SCANNING SYSTEM
WITH CLEAR APERTURE Ø 29 MM
WITH CAPACITIVE SENSORSPD72Z1CAA
100 µm travel range
PD72Z2CAA
250 µm travel range
PD72Z4CAA
400 µm travel range

PIFOC® OBJECTIVE SCANNERS
WITH CLEAR APERTURE Ø 29 MM
WITH STRAIN GAUGE SENSORS
P-721.SDA
100 µm travel range

PIFOC® OBJECTIVE SCANNING SYSTEM
WITH CLEAR APERTURE Ø 29 MM
WITH STRAIN GAUGE SENSORSPD72Z1SAA
100 µm travel range

20

For all adapters and spacers see:

Links to detailed product webpages (PIFOC / Controllers)
can be found on the respective product pages of this brochure.

W W W. P I . W S

3ELECTRONICS FOR
SYSTEMS WITH
CAPACITIVE SENSORS
Cost efficient:
E-709.CRG
Digital piezo controller,
1 axis, –30 to 130 V,
capacitive sensor,
benchtop device
For high dynamic
applications:E-709.CHG
Digital piezo controller,
1 channel, –30 to 130 V,
capacitive sensor,
high power output,
benchtop device
For highest demands:
E-754.1CD
Single-channel, digital
high-speed piezo
controller for capacitive
sensors, with TCP/IP,
USB, and RS-232
interface

ELECTRONICS FOR
SYSTEMS WITH STRAINGAUGE SENSORS
E-709.SRG
Digital piezo controller,
1 axis, –30 to 130 V,
strain gauge sensor,
benchtop deviceConfiguration Diagram for P-726 PIFOC®
High-Load Objective Scanner123

3 step configuration
To be orderd seperately

2

1

3
ELECTRONICS FOR
SYSTEMS WITH
CAPACITIVE SENSORSPIFOC HIGH-LOAD OBJECTIVE
SCANNER WITH CAPACITIVESENSOR®

QUICKLOCK THREAD
ADAPTERSFOR P-726 PIFOC®

For high dynamic
applications:E-709.CHG
Digital piezo controller,
1 channel, –30 to 130 V,
capacitive sensor,
high power output,
benchtop device

P-726.1CD
100 µm travel range

P-726.04
M28 × 0.75
P-726.05
M32 × 0.75
P-726.06
M26 × 1/36”
P-726.11
M25 × 0.75

Microscope turret

P-726.12
W0.8 × 1/36”

Knurled ring

Turret ring

PIFOC

Objective ring

Exploded view of the P-726 QuickLock adapter with
P-726 PIFOC (mounting tools included in the scope ofdelivery).

For all adapters and spacers see:Objective

Links to detailed product webpages (PIFOC / Controllers)
can be found on the respective product pages of this brochure.

MOTION|POSITIONING

21

For detailed information just klick on the respective product image

Sample Positioning in Several Axes
Product Selector
P-611.1 Linear
Piezo Positioning
System

P-620 – P-629 PIHera
Piezo Precision
Positioner

P-541.2 / P-542.2
XY Piezo Stage

P-517 / P-527 MultiAxis Piezo Scanner

P-545 PInano®
XY Piezo System

U-780 PILine® XY
Stage System with
Controller and JoystickM-545 Microscope
XY Stage (Manual
operation)

V-738 PIMag®
High-Precision
XY Stage

L-738 Precision
XY Stage

V-731 / V-741
PIMag® HighPrecision XY Stage

L-731 / L-741
Precision XY Stage

P-753 LISA
Linear Actuatorand Stage
SUPERRESOLUTIONTRAVELRANGE <1 MM

without
ApertureX
AXIS

N-565 Linear Stage
with the highest
precision
SUPERRESOLUTIONTRAVEL RANGE> 1 MM

without
Aperture

P-733.2 XY Piezo
Nanopositioner
with
ApertureSUPERRESOLUTIONTRAVELRANGE <1 MM

P-620 – P-629 PIHera Piezo
Precision Positioner
without
Aperture

XY
AXES
with
ApertureSUPERRESOLUTIONTRAVEL RANGE>1 MM

without
Aperture

22

W W W. P I . W SFor detailed information just klick on the respective product image

P-517 / P-527
Multi-Axis Piezo
Scanner

P-733.3
XYZ Piezo
Nanopositioner

P-545
PInano® XYZ
Piezo System

P-561 / P-562 /P-563 PIMars Nanopositioning Stage

with
Aperture

XYZ
AXES

SUPERRESOLUTIONTRAVEL RANGE<1 MM

without
Aperture

P-616 NanoCube®
Nanopositioner

P-517 / P-527
Multi-Axis Piezo
Scanner

XYθZ
AXES

SUPERRESOLUTIONTRAVEL RANGE
<1 MM

with
Aperture

P-562.6CD PIMars
6-Axis Piezo
Stage System
SUPERRESOLUTIONTRAVEL RANGE
<1 MM

with
ApertureSUPERRESOLUTIONTRAVEL RANGE
>1 MM

with
Aperture

XYZ
θXθYθZ
AXES

H-811.I2/I2V 6-Axis
Miniature Hexapod

H-825 6-Axis
Hexapod23

UHV-compatible version on request.

MOTION|POSITIONINGSample Positioning in Z
Low Profile and Clear Aperture

PD73Z2xOW PInano® Z Microscope Scanner System
for Microtiter Plates
Large Clear Aperture, Low Profile, with Digital Controller
For Inverted Olympus Microscopes

n 
n

Fast step & settle
Clear aperture for well plates and low profile for easy
integrationn nTravel range 220 µm
Outstanding lifetime due to PICMA® piezo actuatorsn 

Piezoresistive sensors for lower costn 

Capacitive sensors for higher stabilityn 

P-736 PInano® Z Microscope Scanner System
Inexpensive, with Low Profile
Low overall height of 20 mm for easy integrationn Product detailsnTravel range 100 µm or 200 µmn

Clear aperture 93 mm × 65 mm
E-709 digital piezo servo controller in the scope of deliveryn nUSB, RS-232, analog interfacesnCompatible with MATLAB, LabVIEW and µManager

Systems include
PInano® Z piezo scannern 

E-709 digital servo piezo controllern Extensive software packagen 

P-737 PIFOC® Specimen Z Positioner
With Large Aperture and Low Profile
Travel ranges to 500 µm

n 

Clear aperture 128.5 mm × 86.5 mm to accommodate wellplatesn 

24n

Low profile 20 mmnCompatible with MATLAB, LabVIEW and µManager

Recommended electronics >> page 32

W W W. P I . W SSample Positioning for Widefield Microscopy
Compact and Fast

N-565 Linear Stage with the Highest Precision
NEXACT® Piezo Walking Drive with Subnanometer Encoder Resolution
Long travel ranges: 13 mm, 26 mm or 52 mm

n 

Ultraprecision: 2 nm minimum incremental motion and directmeasuring PIOne encoder with 0.5 nm resolutionn nCompact design: 65 mm width, 20 mm heightU-521 PILine® Linear Stage
Compact Linear Stage with Ultrasonic Piezo Motor
Travel ranges to 25 mm × 25 mmn Positions small loads quickly and with precision: Velocity
to 200 mm/s, minimum incremental motion to 0.3 µm

n Space-saving: Only 35 mm in width and 15 mm in heightn 

M-545 Microscope XY Stage
Compact, Stable, Long Travel Range
Travel range 25 mm × 25 mmn Stable platform for P-545 PInano® piezo nanopositioning systemsn 

Low profile for easy integration: 30 mm

n Manual operation with micrometer screws, optional motorization
with stepper mike actuatorsn For inverted microscopes from Nikon, Zeiss, Leica, and Olympusn 

V-731 / V-741 PIMag® High-Precision XY Stage
High Travel Accuracy and Stability, Magnetic Direct Drive*
Travel range 205 mm × 205 mm (8”) or 305 mm × 305 mm (12’’)n Bidirectional repeatability to ±0.25 µmn nVelocity to 200 mm/sn

Ironless 3-phase linear motor
Incremental linear encoder with 1 nm resolutionn 

V-738 PIMag® High-Precision XY Stage
Clear Aperture, High Travel Accuracy and Stability, Magnetic Direct Drive*
Travel range 102 mm × 102 mm (4”)

n 

150 mm × 150 mm open frame (in reference position)n Bidirectional repeatability to ±0.25 µm

n 

Velocity to 500 mm/s

n 

3-phase linear motorn 

Incremental linear encoder with 1 nm resolutionn *Spindle-driven versions available (L-731, L-741, L-738)

Recommended electronics >> page 32 et seq.

MOTION|POSITIONING

25

Sample Positioning for Widefield Microscopy
Compact and Fast with Nanometer Resolution

Extensive Functions, Software Support
Powerful macro command language. Nonvolatile macro storage,e.g., for stand-alone operation with autostart macro. Data recorder. ID chip detection for fast startup. PID controller, parameterchanging during operation. Extensive software support, e.g., for
LabVIEW, C, C++, MATLAB, µManager. PIMikroMove user software.

U-780 PILine® XY Stage
System with Controller and JoystickHigh velocity constancy at 10 µm/s

n 

Velocity to 120 mm/s, bidirectional repeatability 0.3 µm

n Travel range to 135 mm × 85 mm (depending on model type)n Compact, flat design: Unrestricted access to the samplen 

Suitable for the following inverted microscopes:n – Nikon Eclipse Ti-E/Ti-U/Ti-S– Olympus IX2– Leica DMI

Systems include
PILine® XY Stagen 

C-867.2U2 Piezomotor controllern 

USB joystickn Extensive software packagen 

PILine® Ultrasonic Piezomotor
An integral part of a PILine® ultrasonic piezomotor is a piezo actuator that is preloaded
against a movable, guided runner via a coupling element. The piezoceramic actuatoris excited to ultrasonic oscillation by a high-frequency AC voltage between 100 and
200 kHz. Deformation of the actuator leads to periodic diagonal motion of the couplingelement relative to the runner. The feed created is a few nanometers per cycle; the highfrequencies lead to the high velocities. Preloading the piezoceramic actuator against therunner ensures self-locking of the drive when at rest and switched off.

26

Learn more ››W W W. P I . W SSample Positioning for Widefield Microscopy
Parallel-Kinematic Designs for Positioning in up to 6 Axes

H-811.I2/I2V 6-Axis Miniature Hexapod
Fast, Compact, and Highly Precise
Travel ranges to ±17 mm / ±21°n 

Load capacity to 5 kgn 

Repeatability to ±0.06 µm

n 

Velocity to 20 mm/sn Superior lifetimen 

Vacuum-compatible versions availablen 

H-825 6-Axis Hexapod
Load capacity to 30 kg, self-lockingn Travel ranges to ±27.5 mm, rotation range to ±11.5°

n 

Actuator resolution to 8 nm

n Minimum incremental motion to 0.25 µm in X, Y, and Zn 

Repeatability to ±0.1 µm / ±2 µradn 

BLDC motors and absolute encodersn 

Recommended Hexapod Motion Controller C-887.52x >> page 33

Technology: Parallel Kinematic Hexapods
In a parallel-kinematic hexapod all drives act on a single moving platform, which
results in a much more compact design than possible with stacked systems.
Compared to a serial robot, hexapods show a much better ratio of payload tooperating weight. As only one platform is moved, the overall moved mass islower resulting in higher dynamics in all motion axes. Serial motion and positioning platforms have their advantages in the high modularity which allows forindividual design of each moving axes. Motion control, especially the homing
procedure, is simpler with no coordinate transformation required. On the other
hand, the combined positioning errors of stacked systems affect the attainable
overall system accuracy. Hexapods can have an improved path accuracy, higher
repeatability and flatness of travel.
Learn more ››27

MOTION|POSITIONINGSample Positioning for Super-Resolution Methods
Tracking and Scanning

P-753 LISA Linear Actuator and Stage
Dynamic and Stable in Position
Travel range to 38 µm

n 
n

Resolution 0.05 nmnGuided stage and actuator at the same time
Particularly fast response behavior due to direct driven nHighest linearity due to capacitive sensors

P-620 – P-629 PIHera Piezo Precision Positioner
Variable Travel Ranges and Axis Configuration
Travel ranges 50 to 1800 µm

n 
n

Resolution to 0.1 nm

nLinearity error 0.02 %n

X, XY, Z versions; XYZ combination possiblenVacuum-compatible versions to 10–9 hPa

P-541.Z / P-541.T Piezo Z Stages / Z and Tip/Tilt Stages

P-541.2 / P-542.2 XY Piezo Stage

Travel range to 150 µmn Travel range to 200 μm × 200 μm

Clear aperture 80 mm × 80 mm

n 

Low profile for easy integration: 16.5 mm

n 

Tip/tilt angle to 1.2 mrad

n 

n 

Clear aperture 80 mm × 80 mm

n 

Low profile for easy integration: 16.5 mm

n 

Parallel kinematics for faster response timesn 

Parallel kinematics for faster response times and higher
multi-axis accuracyn and higher multi-axis accuracyn High-dynamics direct-drive versionn 

Sensor technology: Inexpensive strain gauge sensors or
capacitive sensors for higher performancen 

Combination with microscope stages possible
for long travel ranges

n 

28

Recommended electronics >> page 32 et seq.

W W W. P I . W SSample Positioning for Super-Resolution Methods
Tracking and Scanning

P-733 XY(Z) Piezo Nanopositioner
Travel ranges to 100 μm × 100 μm and to 10 μm in Zn 

Resolution to 0.1 nm due to capacitive sensors

n High-speed versions with direct driven 

Vacuum-compatible and non-magnetic versions availablen 

Parallel kinematics for higher accuracy and dynamicsn 

P-517 / P-527 Multi-Axis Piezo ScannerHigh Dynamics Nanopositioner / Scanner with Direct
Position Measuring
Travel ranges to 200 µm

n Subnanometer resolution and fast responsein the ms rangenE-727 USB controller and software includednExtensive optional accessories >> page 31

2- and 3-axis versions (XY and XYθZ)

Travel ranges to 200 μm × 200 μm × 200 μm

n 

Low profile for easy integration: 20 mm

Subnanometer resolutionnP-545.xC8S PInano® Cap XY(Z) Piezo System

P-545 PInano® Piezo XY(Z) Systems

n

n

n 

Highest linearity due to capacitive sensors

n 

P-545.3D8S PInano® Trak Piezo Tracking System
Travel ranges to 70 μm × 70 μm × 50 μm

n P-545.xR8S PInano® XY(Z) Piezo System
Travel ranges to 200 μm × 200 μm × 200 μm

n 

Inexpensive cost-optimized design due
to piezoresistive sensors

n 

Recommended electronics >> page 33

Excellent Guiding Accuracy Through Flexure Joints
Flexure guides are free of maintenance, friction, and wear, and do not require lubrication.
Their stiffness allows high load capacity and they are insensitive to shock and vibration.
They are 100 % vacuum compatible and work in a wide temperature range.
Learn more ››29

MOTION|POSITIONINGSample Positioning for Super-Resolution Methods
Tracking and Scanning

P-561 / P-562 / P-563 PIMars Nanopositioning Stage
High-Precision Nanopositioning System for up to 3 Axes
Travel ranges to 300 × 300 × 300 µm

n Parallel kinematics for faster response times and higher
multi-axis accuracyn 

P-562.6CD PIMars 6-Axis Piezo Stage System
High-precision Nanopositioning System with 6 Degrees
of Freedom
Travel ranges to 200 µm linear and to 1 mrad tip/tilt angle

n 
n

Clear aperture 66 mm × 66 mmn

Excellent scanning flatness
Parallel kinematics for faster response times and higher
multi-axis accuracyn 

P-616 NanoCube® Nanopositioner
Travel ranges to 110 × 110 × 110 µm

n 

Ultra-compact: 40 mm × 40 mm × 40 mm

n 

Resolution to 0.3 nm

n Highly dynamic motion due to high resonant frequencies
even with loads up to 100 gn 

Only nanopositioner available on the market with ID chipfunctionality

n 

30

Recommended electronics >> page 33

W W W. P I . W S

Accessories for Sample Positioning Stages

P-541.2xx / P-541.Txx
P-541.Zxx / P-542.2xx
Piezo nanopositioningstage

P-737.xxx
PIFOC® specimenfocusing Z stage
•

•

•

•

•

•

•

U-780.DOS
PILine® XY stage system
for Olympus microscopes•

U-780.DLSPILine® XY stage system
for Leica microscopes•

M-545.2MN
XY stage for Nikon
microscopes TI series

•

•*

•**

•

M-545.2MO
XY stage for Olympus
microscopes IX2, IX3

•

•*

•**

•

M-545.2ML
XY stage for Leica
microscopes DMI series

•

•*

•**

•

M-545.2MZ
XY stage for Zeiss
microscopes Axio Observer

•

•*

•**

•

P-736.ZR1S
P-736.ZR2S
PInano® Z piezoslide sanner system

U-780.DNSPILine® XY stage system
for Nikon microscopes

PD73Z2COW
PD73Z2ROW
PInano® Z piezo
scanner system

P-736.ZCN2S
P-736.ZRN2S
PInano® Z piezo
scanner system•

P-545.xR8S
P-545.xC8S
P-545.3D8S
PInano® piezo system

P-733.2xx
P-733.3xx
Piezo nanopositioning
stage

Compatibility of Piezo Scanners with Manual, Motorized and PILine® XY Microscope Stages•* With P-736.AP1 adapter plate / ** With P-733.AP1 adapter plate

Petri dishholder

P-545.PD3

P-736.PDN

P-736.PDO

P-545.PD3

Microtiterplate holder

P-736.WPN

P-736.WPO

Universal
holder

P-736.UHN*

M-687.AP1*

Universal
holdingplateP-545.PP3

P-542.PD1

M-545.2MN
M-545.2MO
M-545.2ML
M-545.2MZ

P-545.SH3*

U-780.DLS

P-736.SHO*

U-780.DOSP-736.ZR1S
P-736.ZR2S

P-736.SHN*

U-780.DNS

PD73Z2COW
PD73Z2ROW

P-545.SH3*

P-737.AP1*

P-736.SHN*
P-736.SHO*

P-736.SHN*
P-736.SHO*

P-736.SHN*
P-736.SHO*

P-545.SH3*
withM-545.SHP

P-737.AP2

P-736.PDN
P-736.PDO

P-736.PDN
P-736.PDO

P-736.PDN
P-736.PDO

P-545.PD3
with
M-545.SHP
adapterplate

P-736.WPN
P-736.WPO

P-736.WPN
P-736.WPO

P-736.WPN
P-736.WPO

P-736.UHN*
M-687.AP1*

P-736.UHN*
M-687.AP1*

P-736.UHN*
M-687.AP1*

P-737.xxx

P-736.ZCN2S
P-736.ZRN2SMicroscopeslide holder

P-541.2xx
P-541.Txx
P-541.Zxx
P-542.2xx

P-545.xR8S
P-545.xC8S
P-545.3D8S

Inserts for PI Sample Stages

P-542.SH1*

P-545.PP3

P-545.PP3
with
M-545.SHP

M-545.SHP adapter plate* Also available: P-545.C18 Coverslip holder (for 18 mm × 18 mm coverslips),
P-545.C22 (for 22 mm × 22 mm coverslips) and P-545.C25 (for 25 mm × 25 mm coverslips)

31

MOTION|POSITIONING

Single Channel Digital Controllers
Plug-and-Play via Extensive Software Package

E-709 Compact and Cost-Optimized
Digital 1-Channel Piezo Controller
Linearity error to 0.02 %n Comprehensive I/O functionsn 

Fast 25 Mbit/s serial interface USB, digital RS-232,
fast serial interface with up to 25 MBit/sn 

E-709.CHG Digital 1-Channel Piezo
Controller for High Dynamic Applications
Output power up to 50 W

n 

Linearity error to 0.02 %n USB, RS-232

n 

SPI: Fast 25 Mbit/s serial interfacen Comprehensive I/O functionsn 

E-754 Digital 1-Channel Piezo
Controller for Highest Demands
Next generation digital controller provides higher
flexibility, accuracy, and speedn 

Analog inputs and outputsn 

Autoloading of calibration data from stage ID chipfor interchangeability of controller and mechanicsn 

Digital I/O lines for task triggeringn 

Further compatible electronics (e. g. analog controllers or OEM modules) available on request.

Extensive software for rapid start of productive operation

32

Thanks to support of MATLAB and LabVIEW as well as all common operating systems (Windows, Linux, and macOS), integration
succeeds in virtually every environment – quickly and efficiently. Sophisticated programming examples and software tools such as
PIMikroMove shorten the time to productive operation considerably.

W W W. P I . W S

Multi-Channel Digital Controllers
Plug-and-Play via Extensive Software Package

E-727 Digital Multi-Channel Piezo Controller
For Nanopositioning Systems with Capacitive, Piezoresistiveor Strain Gauge Sensors
20 kHz control bandwidthn Interfaces: Ethernet, USB, RS-232, SPIn 

Digital inputs and outputsn 

Optional analog inputs and outputsn 

Autoloading of calibration data from stagen 

ID chip for interchangeability of controller and mechanicsn 

4 order polynomial linearization for mechanics and electronics

n  thE-712 Digital Piezo Controller
Modular System for up to 6 Axes for Highest Precision
Up to 50 kHz servo update raten 

Highly stable 20-bit D/A convertern Real-time operating system for excellent trajectory control

n Autoloading of calibration data from stage ID chip forinterchangeability of controller and mechanicsn 

Flexible interfaces: TCP/IP, USB, RS-232; optional
broadband analog inputs and outputsn Extensive software packagen 

C-887.52x Hexapod Motion Controller
Compact Bench-Top Device for Controlling 6-Axis Systems
Sophisticated controller using vector algorithmsn 

Commanding in Cartesian coordinatesn 

Easy customization of coordinate systems by commandn 

Analog interfaces and motion stop optionaln Extensive software packagen 

Further compatible electronics (e. g. analog controllers or OEM modules) available on request.

MOTION|POSITIONING

33

Multi-Channel Digital Controllers
Plug-and-Play via Extensive Software Package

C-867.2U2 PILine® Motion Controller
For Two-Axis Positioning Stages with PILine® Ultrasonic Piezo MotorsnIntegrated power amplifier with dynamic frequency controlnMultifunctional encoder input: A/B, sin/cos, BiSSnMacro programmable for stand-alone functionalitynIntegrated interfaces: USB, RS-232, TCP/IP, SPI, I/O, joystickn

Daisy chain networking
Trajectory support for 1- or 2-D motion patternsn ­SMC Hydra Universal Motion Controller
For electromagnetic motors, DC servo and brushless
DC motors (BLDC), linear and torque motors(2 / 3 phases), 2-phase stepper motorsn

2-D vector motionnDigital inputs and outputs
Optional: Encoder-based trigger output, Dynamic
position correction

n 

n

34

Joystick operation via CAN bus

Further compatible electronics (e. g. analog controllers or OEM modules) available on request.

W W W. P I . W S

The PI GroupA Strong Partner for Industry and Research

PI (Physik Instrumente) has been one of the leading players in the
global market for precision positioning technology for many years.
The technological diversity of the PI Group is unique all over theworld. PI develops, manufactures, and qualifies all its core technologies itself. PI is therefore not dependent on components available
on the market to offer its customers the most advanced solutions.
The complete control over vertically linked manufacturing processes
allows flexible reaction to market developments and new requirements.
Modern organizational forms such as the fractal production model
guarantee efficient production for batch sizes of 1, small series, andalso OEM products in large quantities. By acquiring the majority
shares in ACS Motion Control, a worldwide leading developer andmanufacturer of modular motion controllers for multi-axis drive
systems, PI can also offer solutions from one single source to meetthe industry‘s increasing demands on precision and throughput.

Core TechnologiesnIn-house manufacturing of piezo components andpiezo actuatorsnMagnetic direct drives: linear motors and voice coilsnAir bearings, magnetic and flexure guidesnComprehensive range of piezo motor technologiesnNanometrology sensorsn arallel-kinematic systems for positioning in six axes
P
(Hexapods)nMotion control technologynSoftware

The foremost priority for PI is to be a reliable and highly qualified
partner for the customer.

35

MOTION|POSITIONING

From 1-off to Series:
OEM Customers Benefit From Maximum Flexibility

PI serves both the research and industrial markets. The complete control over the design and manufacturing process provides our customers with significant competitive advantages. Optimized processes allow
PI to deliver customized products in quantities up to several 100,000 units per year at low cost and righton time. The range of OEM products offered by the PI Group varies widely, ranging from “bare” actuatorsand sensors to highly integrated parallel-kinematic positioning systems. Evaluation of pre-production run
samples, test procedures, production processes and quality management are all included in the development process.
ServicesnGlobal account management: Close proximity to the customer thanks to international presencenRisk assessment from design to deliverynDepending on the task: From the drive to the turnkey systemn

Copy exactly policynPreparation of internal and external certificationnProduction of series of several 10,000 units in the shortest timen

Sustainable spare parts servicenManufacturing and testing capacities from functional samples to mass production

Standardized performance control with full documentation of individual measurement charts

36

W W W. P I . W SGlobal Service and After-Sales

On-site training is key to optimize and maximize the potential of new PI systems

Start-Up, User Training and Life Long Support

Contracted Services

PI is dedicated to supporting its customers right from the initial consultation
through to when a customer has purchased a PI system. Beyond that, PI’s services
division is committed to ensuring that every aspect of owning a PI system iscatered for.

Customers subscribing to Contractual Support Services will receive commitment fromPI to achieving agreed Service Levels. These
include responding to the customer’s firstcontact and providing remote technicalsupport, through to response times for a PI
expert to be on site, either to repair or replacea defective unit.

Global Coverage
Supported by 4 Global Service Hubs in Asia, China, Europe and USA, with field
product specialists working from these hubs, PI is able to support all technologies and customer applications via this global services team.
PI’s Standard On-Site Services
Set up and Commissioning – On-site support to un-box, set-up andcommission the PI system

n



n



n



n



Training Program – User training on software and programming,
through to optimization of system performance
Maintenance Systems Health Check – Preventative maintenance toprolong the life of the motion device
Support – Ongoing remote and on-site support to maximize system
uptime and provide maintenance for the whole life of any system

Extended Warranty
Most customer applications require PI’s
systems to be operational beyond the standard warranty period. Extending the warranty
for additional year(s), is simply extending thecustomers peace of mind and PI’s commitment that the product will not fail due to poor
workmanship or faulty materials. Shoulda customer’s system then fail due to these
conditions, PI will cover the costs to repair or
replace it.

37

MOTION|POSITIONING

The PI Group Milestones
A Success Story

PI has been developing and manufacturing
standard and OEM products with piezo or
motor drives for more than 40 years. Continuous development of innovative drive concepts, products, and system solutions andmore than 200 technology patents distin-

guish the company history today. In addition
to four locations in Germany, the PI Group isrepresented internationally by fifteen sales
and service subsidiaries. PI is a privately
owned company with healthy growth andmore than 1000 employees worldwide.

Market introductionof the PICMA®
multilayer piezo
actuators

Market introductionof PILine® ultrasonicpiezomotors

Foundation of PI Ceramicin Thuringia, Germany,
cornerstone for market
leadership in nanopositioning technology
Founding year
of PI

2002

2 0 01

1998

1994

1992

1993

Market introduction of capacitive
position sensors, implementationin piezo-based nanopositioning
systems

1991

1987

1970

Market introductionof six-axis parallelkinematic positioning
systems (Hexapods)

Market introductionof digital
control electronics
Newsubsidiaryin the USA

New
subsidiaryin Japan

New subsidiaries
in Great Britain
and France

38

W W W. P I . W S

Newsubsidiary
in ItalyNew
subsidiaryin China

2 0 172018Market introductionof the magnetic
PIMag® direct drives

2014

Introductionof air bearings

Acquisition ofmajority sharesin ACS Motion
ControlAcquisitionof Nelson
Air Corp., USA

2 0 11

2007

2004

Foundationof PI Innovation

2016

Acquisitionof majority sharesin miCos GmbH,
Eschbach, Germany

2015

Market introductionof the NEXLINE®
high-performancepiezo linear drives

PIRest active
shim piezo
technology
Market introductionof Q-Motion®
and PiezoMikes

Engineered
motionplatforms

Market introductionof NEXACT®
piezo linear drives
New subsidiaries
in Korea andSingapore

New subsidiaries
in Taiwan and theNetherlands

39

MOTION|POSITIONING|POSITIONING

Headquarters

ACS Motion Control

PI Subsidiaries

GERMANYISRAELUSA (East) & CANADA

USA (West) & MEXICO

Physik Instrumente (PI)GmbH & Co. KG
Auf der Roemerstrasse 176228 Karlsruhe
Phone +49 721 4846-0
Fax		 +49 721 4846-1019
info@pi.ws
www.pi.ws

ACS Motion Control Ltd.
Ramat Gabriel Industrial Park
1 Hataasia St.
Migdal HaEmek, 2307037
POB 984
Phone +972-4-6546440
Fax		 +972-4-6546443
info@acsmotioncontrol.com
www.acsmotioncontrol.com

PI (Physik Instrumente) L.P.
Auburn, MA 01501
www.pi-usa.us

PI (Physik Instrumente) L.P.
Irvine, CA 92620
www.pi-usa.us

USA (San Francisco Bay Area)

UK & IRELAND

PI (Physik Instrumente) L.P.
Sausalito, CA 94965
www.pi-usa.us

PI (Physik Instrumente) Ltd.
Cranfield, Bedford
www.physikinstrumente.co.uk

ITALY		NETHERLANDS

Physik Instrumente (PI) S. r. l.
Bressowww.pionline.it

PI Benelux B.V.
Sint-Oedenrode
www.pi.ws/benelux

FRANCE		SPAIN

PI France SAS
Aix-en-Provence
www.pi.ws

Micos Iberia S.L.
Vilanova i la Geltrú
www.pimicos.es

PI miCos GmbH
Freiburger Strasse 30
79427 Eschbach
Phone +49 7634 5057-0
Fax		 +49 7634 5057-99
info@pimicos.com
www.pi.ws
PI Ceramic GmbH
Lindenstrasse
07589 Lederhose
Phone +49 36604 882-0
Fax		 +49 36604 882-4109
info@piceramic.com
www.piceramic.com

JAPAN
PI Japan Co., Ltd.
Tokyo
www.pi-japan.jp

PI Japan Co., Ltd.
Osaka
www.pi-japan.jp

CHINA© Physik Instrumente (PI) GmbH & Co. KG
All contents, including texts, graphics, data etc., as well as their layout,
are subject to copyright and other protective laws. Any copying, modification or redistribution in whole or in parts is subject to a written
permission of PI.
Although the information in this document has been compiled withthe greatest care, errors cannot be ruled out completely. Therefore,
we cannot guarantee for the information being complete, correct and
up to date. Illustrations may differ from the original and are notbinding. PI reserves the right to supplement or change the information
provided without prior notice.

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www.pi-china.cn

SOUTHEAST ASIA

TAIWAN

PI (Physik Instrumente)
Singapore LLP
Singaporewww.pi-singapore.sg
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KOREA
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Seoul
www.pikorea.co.kr

W W W. P I . W S

BRO28E R5D PI Products for Microscopy 12/2018 0,2. Subject to change without notice. © Physik Instrumente (PI) GmbH & Co. KG 2018

MOTION