PIRest Actuators
A C T I V E S H I M S W I T H L O N G - T E R M S TA B I L I T Y
AND NANOMETER RESOLUTION

W W W. P I . W SPIRest Technology

Using PIRest active shims

COMPLETELY NEW PIEZO TECHNOLOGYFOR ACTIVE ADJUSTMENT OFCONSISTENTLY STABLE GAPS
When a target or actual gap between two components in a machinechanges, it may be necessary to adjust it.
The disadvantage of classical flat washers that are ground exactly to the required gap, is that they need to be inserted mechanically. It is not always possible to adjust them as finely as required
and the predefined gap cannot be changed any more.
This is different in the case of the piezo-based PIRest active
shims, which only need to be inserted once and can actively
adjust or readjust the gap between two components.

Conventional piezoceramic actuators were not suitable for thispurpose. The electrical voltage (offset voltage) at the actuatorneeds to be maintained as long as the displacement is required –a considerable disadvantage for the lifetime of the actuator andthe equipment of the machine, which also requires an additionaland stable power supply.
Although the PIRest technology is based on piezo actuators, itnevertheless maintains a stable displacement with nanometer
accuracy after adjusting even without offset voltage.

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EASY TO USE

The advantages of PIRest at a glance■

No permanent voltage required to hold the position. Saves costs
during initial installation and makes adjustment much easier■Flexible shapes and functions. The manufacturing process for PIRest
actuators is largely identical to classical piezoceramic actuators,
which PI can already produce in large quantities, and is also in aposition to shape them according to customer specifications.

■

Actuator lifetime of >20 years assuming an average of 3 adjustingprocedures daily

To readjust the static gap, a voltage connection is provided for the active shim, which
only needs to be connected to a voltage
source for the respective adjusting process.
PI offers a mobile power supply for this adjusting process that makes setting very easy.

■

Travel ranges up to 10 µm as standard product (longer travel ranges
possible with custom products)■

Nanometer resolution, micrometer displacement. PIRest have thesame classical properties as piezoceramic actuators.

■

Long-term position stability■

Easy adjustment of the displacement, e.g., with a handheld device

This considerably simplifies adjustment at
inaccessible places because any cables required can be considered during the designof the machine and therefore routed permanently in the system.

■

Hybrid actuators with the capability of adjusting over several
millimeters or compensating vibration dynamically■

One to six-axis versions are possible. Optional temperature sensor
for the actuator

The active shims are already designed into
the machine during the initial construction.
They can be made in virtually any shape andsize and integrated almost anywhere – asplates or rings or even complex hybrid drive
components that actively compensate vibration beyond static adjustment or perform
other motion with nanometer accuracy.

LONG-TERM STABILITY
Tests at PI have demonstrated that the stability of the displacement of PIRest actuators
depends only on changes in the ambient temperature. Using an actuator with 5 µm nominal adjustment range, long-term tests indicated a position drift of less than ±35 nm in atemperature-stable environment that does
not deviate by more than 1 K.
Position stability of the P-131.12 PIRest active shim over 180 days, ±35 nm

NANOMETER RESOLUTION
The system, consisting of a PIRest actuatorand a manual control device, can generatechanges in length of a few nanometers irrespective of the load.

PIRest precision positioning: Length changes in the range of only a few nanometers

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Applications

Applications for active shims can be found everywhere, where
the gap between two assemblies is critical and needs to be readjusted as a result of drifting or changes in tolerance. Particularly
when the ambient conditions and the accessibility make manualintervention complicated, PIRest actuators are a feasible option■

For qualification and calibration of a machine■

During first installation of machines at the customer’slocation

PIRest actuators can be used to compensate misalignment
caused by settling after the initial setup of a machine at thecustomer’s location.

Alignment (µm)
error+2+10–1–2PIRest(µm)
elongation+2+10–1–2

Realignment as a consequence of temperature drift■

During realigning due to changed dimensions ofcomponents, for example

Due to the actuator’s high resolution of only a few nanometers,
not only those applications in classical mechanical engineering
are included, but also alignment of optical components in astronomy, or material research in synchrotrons, and in semiconductor manufacturing for example.

PIRest actuators can be used to compensate mechanical drift
during operation of a precision machine.

Alignment (µm)
error+2+10–1–2t (days)

PIRest(µm)
elongation+2+10–1–2System
PIRestt (days)■VVoltage

U (V)

U (V)

++0–t (months)

SystemPIRestt (months)

VVoltage0t (days)–Compensation of settling after the initial setup of a machinet (months)

Compensation of machine drift during operation

Flexibility due to hybrid actuators
Hybrid actuators consist of a classical and a PIRest piezo actuator.
While the PIRest actuator part corrects the position permanently
as described, it is possible to use this as a basis for performingdynamic motion via the classical actuator. This can be helpful for
dynamic compensation of vibration in a range of several 10 Hz
or for readjusting a focal plane during a measuring or scanning
process, or for controlling a laser beam in measuring technology
or material processing.

PIRest active shim (blue)
Adjustment range: 4.6 µm
Hybrid PIRest actuatoravailable as custom product

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PICMA® actuator (yellow)
Adjustment range: 5 µm
Resolution: <50 pm

P-131 PIRest Actuators
Active Shims with Nanometer Resolution and Long-Term Stability■Long-term stability without permanent power supply

Fields of application■

Easy readjustment of machines at inaccessible locations■

Set-and-forget applications■

Avoids time-consuming manual adjusting processes■

Adaptive mechanics■

Nanometer resolution and micrometer displacement■

Drift compensation■

Load capacity up to 4000 N per actuator■

Alignment of optical components■

Temperature sensor■

Precision mechanics■

Static precision positioning■

Metrology / interferometryLong-term stable positioning without permanent power supply
Once displaced, actuators with PIRest technology hold their position stablewithout permanent control voltage. Nanometer precision, maintenancefriendly and inexpensive adjustments are possible even at inaccessible
locations.
High user-friendliness due to automatic configuration
Important operating parameters are stored on the mechanic’s ID chip andare read out automatically when the electronics are switched on.

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P-131.11

P-131.12

P-131.13

Unit

Tolerance

Dimensions OD × ID × L

22 × 8 × 7

22 × 8 × 17

22 × 8 × 32mm

Nominal travel range*

2510µmMin. incremental motion*<10<10<10nm

Load capacity4000

4000

4000

Nmax.

Stiffness

1000

350

170

N/µm

typ.

Electrical capacitance

3.4

10.2

20.4

µF

±20 %

Operating point for activeadjustment

120120120Vmax.

Operating point a for long-term
stable position

000

V

Cable length

1.5

1.5

1.5m

Voltage connection

HD D-sub 15 (m)HD D-sub 15 (m)HD D-sub 15 (m)ID chip

Yes

Yes

Yes

Temperature sensor

Yes

Yes

Yes

Operating temperature range

5 to 40

5 to 40

5 to 40

Recommended electronics

E-135

E-135

E-135

±20 %

PIRest operating modes

Miscellaneous°C* At room temperatureVacuum versions available on request.
Ask about customized versions.

P-131.1x: Dimensions in mm

P-131.11
P-131.12
P-131.13

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Travel range

L2 µm
5 µm
10 µm

7 mm
17 mm
32 mm

Ordering Information

PIRest active shims
P-131.11

PIRest active shim, 2 µm travel range

P-131.12

PIRest active shim, 5 µm travel range

P-131.13

PIRest active shim, 10 µm travel range

Accessories
E-815.AK200 PIRest adapter cable, 2 channels, 2 × HD D-sub 15 (f) to HD D-sub 15 (m), 0.5 m
E-815.AK300 PIRest adapter cable, 3 channels, 3 × HD D-sub 15 (f) to HD D-sub 15 (m), 0.5 m
E-815.AK600	PIRest adapter cable set, 6 channels, consisting of 2 × E-815.AK300(channels 1 to 3 and channels 4 to 6)

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E-135 PIRest Drive Electronics
Control of up to 6 PIRest Active Shims■

Easy readjustment of machines at inaccessible locations■

Control of up to 6 PIRest active shims■

Independent adaptation of operating parameters to the ambient conditions■

ID chip detection for automatic configuration of operating parameters■

Interfaces: TCP/IP, USB

Long-term stable positioning with PIRest active shims

Application fields

The PIRest drive electronics are only necessary during the adjustment
process of the PIRest compensating actuators. Once displaced, actuatorswith PIRest technology hold their position stable without permanent control voltage. Nanometer precision, maintenance-friendly and inexpensive
adjustments are possible even at inaccessible locations. Up to 6 actuators
can be connected and adjusted one after each other.

■

Set-and-forget applications■

Adaptive mechanics■

Drift compensation■

Adjustment of optical components■

Precision mechanics■

Static precision positioning■

Metrology and interferometry

High user-friendliness due to automatic configuration
Important operating parameters are stored on the mechanic’s ID chip andare read out automatically when the electronics are switched on. The operating parameters are adapted to the ambient conditions independently
during the adjusting procedure.
Easy integration and handling
All PIRest active shims are equipped with a D-sub connector. The cablefor connecting to the drive electronics is available in several variants undmust therefore be ordered separately. A PC controls the drive electronics
via an Ethernet or USB interface. Software support is included in the scopeof delivery.

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E-135.601M
Function

Drive electronics for PIRest active shims

Channels

6; individual control one after another

Output signal
Output voltage–100 to 125 V

Max. output current

500 mA

Current limitation

Short-circuit proof

Interfaces
Actuator connection

HD D-sub 15 (f)Communication

TCP/IP, USB

Separate protective earth connection

Yes

Display and indicators

LEDs for Power, Error

Operation
Command set

PI General Command Set (GCS)

User software

PIMikroMoveApplication programming interfaces

API for C / C++ / C# / VB.NET / MATLAB / Python, drivers for NI LabVIEW

Supported functions

ID chip detection, temperature evaluation

Miscellaneous
Operating temperature range

5 °C to 40 °C

Operating voltage

24 V DC (external power adapter in the scope of delivery)

Max. power consumption

17 W

Mass

0.7 kgAsk about customized versions.

E-135.601M: Dimensions in mm

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Ordering Information

PIRest drive electronics
E-135.601M

PIRest drive electronics for up to 6 actuators, HD D-sub 15 sockets, TCP/IP and USB interface

Accessories
E-815.AK200 PIRest adapter cable, 2 channels, 2 × HD D-sub 15 (f) to HD D-sub 15 (m), 0.5 m
E-815.AK300 PIRest adapter cable, 3 channels, 3 × HD D-sub 15 (f) to HD D-sub 15 (m), 0.5 m
E-815.AK600	PIRest adapter cable set, 6 channels, consisting of 2 × E-815.AK300 (channels 1 to 3 and channels 4 to 6)

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E-815.AK200: PIRest adapter cable, 2 channels, 0.5 m

E-815.AK300: PIRest adapter cable, 3 channels, 0.5 m

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|POSITIONING

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BRO63E R2 PIRest 06/2019 0.5. Subject to change without notice. © Physik Instrumente (PI) GmbH & Co. KG 2019

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