MOTION|POSITIONING

Precision components, stable control and a great deal of experience in engineering are essential for high-precision complex motion and positioning solutions. PI
is a supplier of technologically sophisticated drive components and high-precision positioners and also offers all levels of integration up to the turnkey solution.
Engineering services have been a part of PI’s core business for many years. Complete
solutions, fitting seamlessly into existing processes, advance automation in major
research installations as well as manufacturing and inspection processes for chipproduction or photonics packaging.

Headquarters

Subsidiaries

GERMANY

USA (East) & CANADA

USA (West) & MEXICO

Physik Instrumente (PI)GmbH & Co. KG
Auf der Roemerstrasse 176228 Karlsruhe
Phone +49 721 4846-0
Fax		 +49 721 4846-1019
info@pi.ws
www.pi.ws

PI (Physik Instrumente) L.P.
Auburn, MA 01501
www.pi-usa.us

PI (Physik Instrumente) L.P.
Irvine, CA 92620
www.pi-usa.us

USA (San Francisco Bay Area)

UK & IRELAND

PI (Physik Instrumente) L.P.
Sausalito, CA 94965
www.pi-usa.us

PI (Physik Instrumente) Ltd.
Cranfield, Bedfordwww.physikinstrumente.co.uk

ITALY		NETHERLANDS

Physik Instrumente (PI) S. r. l.
Bressowww.pionline.it

PI Benelux B.V.
Sint-Oedenrode
www.pi.ws/benelux

FRANCE		SPAINPI France SAS
Aix-en-Provence
www.pi.ws

Micos Iberia S.L.
Vilanova i la Geltrú
www.pimicos.es

PI miCos GmbH
Freiburger Strasse 30
79427 Eschbach
Phone +49 7634 5057-0
Fax		 +49 7634 5057-99
info@pimicos.com
www.pi.ws
PI Ceramic GmbH
Lindenstrasse
07589 Lederhose
Phone +49 36604 882-0
Fax		 +49 36604 882-4109
info@piceramic.com
www.piceramic.comJAPANPI Japan Co., Ltd.
Tokyo
www.pi-japan.jp

PI Japan Co., Ltd.
Osaka
www.pi-japan.jp

CHINA

Core Competencesn A pplication support and consulting for motion and positioning applicationsn R eliable and prompt series production even for large quantitiesn

Economic designnCommissioning of turnkey solutionsnComplex multi-axis designs and parallel kinematic roboticsn B road spectrum of technologies: Drive, guide, and sensor technologies

Complex multi-axis designs and fully integrated
systems are available, like this assembly systemfor photonics packaging

nIn-house motion control electronics and software platformn C
 ustomized software integration such as Epics, LabVIEW, Tango, …

MOTION|POSITIONING© Physik Instrumente (PI) GmbH & Co. KG
All contents, including texts, graphics, data etc., as well as their layout,
are subject to copyright and other protective laws. Any copying, modi­
fication or redistribution in whole or in parts is subject to a written
permission of PI.
Although the information in this document has been compiled withthe greatest care, errors cannot be ruled out completely. Therefore,
we cannot guarantee for the information being complete, correct andup to date. Illustrations may differ from the original and are not bind­ing. PI reserves the right to supplement or change the information
provided without prior notice.

Physik Instrumente(PI Shanghai) Co., Ltd.
Shanghaiwww.pi-china.cn

Physik Instrumente(PI Shanghai) Co., Ltd.
Beijing
www.pi-china.cn

SOUTHEAST ASIA

TAIWAN

PI (Physik Instrumente)
Singapore LLP
Singaporewww.pi-singapore.sg
For ID / MY / PH / SG / TH / VNM

Physik Instrumente (PI)Taiwan Ltd.
Taipeiwww.pi-taiwan.com.tw

KOREA
PI Korea Ltd.
Seoul
www.pikorea.co.kr

W W W. P I . W S

BRO61E Gantry Systems 2017/06/08 0.2 Subject to change without notice. © Physik Instrumente (PI) GmbH & Co. KG 2017

Engineered Systems Capabilities

Gantry Systems
L A S E R M A T E R I A L P R O C E S S I N G , W A F E R I N S P E C T I O N A N D E L E C T R O N I C S A S S E M B LY

W W W. P I . W SThroughput,Precision and Reliability

Simultaneous 2D Processing

PIMag® Gantry SystemSolutions for Motion-Centric Industrial Automation

High Accuracy and Ultimate Throughput

High-Dynamic Precision Positioning in 3 Axes

XY and Portal Systems from PI
Positioning and motion tasks in industrial automation such as thosein assembly, semiconductor manufacturing, mechanical engineering, laser material processing, inspection systems or in additive
manufacturing demand solutions that need to be robust and reliable.
PI offers a broad range of in-house drive and motion control technologies such as EtherCAT-based industrial controllers by ACS, wherePI holds the major shares, or air bearing technology for optimized guiding accuracy. System engineering for customization anda global service and training network are added-value offers. PI istherefore the ideal partner for motion-centric industrial solutions.

Together with SCANLAB and ACS, PI offers a motion control
solution for laser material processing, which combines thelaser beam scanner and sample scanner, provides the ability to mark and process large pieces with very high precision
and an ultimate throughput.

ACS is a worldwide leading developer and manufacturerof modular motion controllers for multi-axis drive systems.
The partnership with ACS has put PI into a position to sup­ply customized complete systems for industrial applications
with the highest demands on precision and dynamics andalso to add its extensive experience in high-end projects
for industrial applications intended to combine precision,productivity, and reliability all over the world.

Vertical axis with pneumatic counter weightn	508 mm x 508 mm x155 mm travel rangen	Ironless linearmotorsnDirect measuring incremental linear encodersnControlled by ACS Motion Control

Key AdvantagesnLarge field of view, wide range of XY stagesn	Significantly increased throughput (up to 41%compared with conventional systems)n	No stitching errors

Typical Applicationsn	Higher precisionnn

Smarter Motion & Positioning

nLarge-area markingn	Glass cutting

Smooth processing with high dynamics andno stage vibrations high speed scanningn	Drilling of large-area PCBs

No Stitching Errors
Piecewise processing (stitching) of large workpieces is prone tomarking displacement near the edges of adjacent fields. By combining the motion of the scan head with the motion of the XY stage,
stitching errors are eliminated and in addition the process time isshortened significantly (image by SCANLAB).
Stiching motion

Simultaneous movement

PreliminarySpecifications
Active axes

UnitXYZ

508

508

155

Integrated sensor

Optical linear encoder,incremental

Optical linear encoder,incremental

Optical linear encoder,incremental

Sensor resolution

Motion andpositioning
Travel range

0.002

0.002

0.002µm

0.5

0.5

0.5µm

Max. velocity*)

3000

3000

2000

mm/s

typ.

30

30

20m/s2

typ.

Ball bearing

Ball bearing

Cross roller bearings
kgmax.

Ironless linear motor

Ironless linear motor

Ironless linear motor withpneumatic counterbalance

20 µm sin/cos

20 µm sin/cos

20 µm sin/cos

Max. acceleration**)Bearings
Load capacity

Feedback
Material of base

Frictionless high-precision positioningn	Excellent velocity stability

5n	Excellent guiding accuracy up to 5 µrad/100 mmn	Optional active yaw control for gantriesn	Direct drive linear & torque motors for smooth,high speed scanning
A-322 Piglide XY stage with ironless linear motors andair bearing technology

Experience with matters for OEMs. PI is building on over
200 man-years of in-house air bearing experience andoffers comprehensive precision air bearing motion control
and positioning products and systems.

W W W. P I . W S

GranitePowered by ACS and SCANLAB
The jointly developed syncAXIS control software enables
simultaneous control of a 2D scan head and a 2D scanningstage equipped with high-dynamic magnetic linear drives.
The combined system substantially increases the image fieldsize for wide-area marking, and in addition provides superior
capabilities for cutting of glass, drilling of large PCBs andlaser micro-machining. Unlike tiled processing, this innova­
tive laser processing system with an extended image field
can significantly slash process times, thereby deliveringenhanced productivity and cost reduction in manufacturing.

W W W. P I . W Styp.

Mechanicalproperties

Miscellaneous

nmm

Unidirectional
repeatability

Motor typeAir bearing technology provides

Tolerance*	Maximum speed based on stage capability. Maximum application velocity may be limited by system data
rate and system resolution. Maximum speed of the z-axis is specified without pneumatic counterbalance.
** No load. Maximum acceleration of the z-axis is specified without pneumatic counterbalance.

MOTION|POSITIONING