H900 Series
HRAD

SURUGA SEIKI ltd,.

SG13-113-001

Introduction
Thank you for purchasing our company's product.
To use it properly, read this user's manual carefully before using it.
After reading it, keep it in a safe place for future reference.

Notes- Please note that the content of this document may be changed without notice infuture for improving performance and functions.
The content displayed on the actual screen may be slightly different from displayedcontent shown in this document.
- The content of this document is created with extra care, however, if you have any
inquiries or questions, please contact our company.

History
Edition

Date

Content of revisionFirst edition

August 2005

Newly created

2nd edition

October 2005

Description of motor mode and external control added

3rd edition

December 2005

Confirmation message before remote status added

4th edition

April 2006

Description of functions such as automatic dimming,
screen expansion function, image data output, polygon
measurement standard deviation display added
Description of sample software corresponding tocommand added

5th edition

June 2006

Size of sensor head fixation bolt corrected

6th edition

August 2006

Dimensions in drawing corrected
Measurement data clear function added

7th edition

September 2007 External synchronous function in polygon mode added

8th edition

May 2008

Address of Tokyo business office changed

9th edition

April 2010

Address of Tokyo business office changed

10 th edition

March 2011

11 th edition

August 2012

LD power automatic adjustment convergence conditionchangedAddresses of head quarters and business office deleted
Description of mirror display method selection function
added
Description of I/O mode selection function added1

SG13-113-001

Accessories
Before using the product, check the following accessories are included with it.
- HSP-100S (or SH): controller.............................................. 1 unit
- I/O connector XW4B-10B1-H1 (made by Omron) .............. 1 piece- AC power cord for HSP-100S ............................................. 1 piece- Sensor head cable (2m)...................................................... 1 piece- Sensor head (one of followings).......................................... 1 unit
H900-P017, H900-P017C, H900-P050C, H900-P090C- User's Manual (this document) ........................................... 1 copy
- Target for adjusting light axis............................................... 1 piece- C mount rotation ring (only H900-P017C)........................... 1 piece(IMPORTANT)The included AC power cord is a power cord dedicated to this controller.
Do not use it for other product.

2

SG13-113-001

To use the product safely
Before using the product, be sure to read the following precautions.

mark means

the prohibition.

CAUTION！

Be sure to observe precautions shown here. If you do not observe these precautions,
you may get injured or physical damage may be caused.
- Precautions on safety and use
・ Installation and operation of this product should be carried out by a person who has
knowledge on safety of laser equipment.
・ If the noise environment is severe, use a table tap with noise filter.
・ Be sure to ground the controller. Otherwise, you may get electric shock.
・ During the measurement, do not turn OFF the power supply. Otherwise, a part of or
all measurement data or setting data may be lost.
- Wiring
・ When you connect and disconnect a cable, turn OFF the power supply of main unit
and that of devices to be connected. Otherwise, the main unit may be damaged.
・ When you connect a control cable of an external device, check the polarity of thedevice. If you mistake it, the device may be damaged.
・ The calibration is carried out in combination with sensor head and controller when the
product is shipped from factory.
Do not change the combination of head and controller.
- Use environment
Do not use the product at following places.
- Place with much dust or powder dust
- Place where the temperature changes widely- Place where there is vibration- Unstable place where there is slope- Place exposed to corrosive gas or combustible gas

3SG13-113-001

CAUTION！

- Management and storage
If you want to move this product because it is not
used for a long time, pull out the power plug from theoutlet.
An unexpected accident such as fire and electric
shock is prevented.
- Power supply
The power supply can be connected to only AC100-240V power supply outlet.
- Disassembly and modification
Do not carry out disassembly, modification, or improper repair ofmeasurement head or controller chassis.
If there is a defect, please contact the sales group, OST business division of orcompany.
- Request the repair
In the following cases, stop using the product immediately and request the repair tothe sales group, OST business division of or company.
If you keep using it without any change, fire, electric shock, or personal injury may becaused.
- There is abnormal sound, abnormal odor, or smoking- The power cord is damaged- If water is poured on this product or abnormal object enters
the product- This product is fallen or the cabinet is damaged

For the contact information, refer to page 79.

4SG13-113-001

INDEX
Introduction ...................................................................................................... 1
Notes ................................................................................................................. 1
History............................................................................................................... 1
Accessories ...................................................................................................... 2
To use the product safely ................................................................................ 3
1. Name and function of each part .................................................................. 7
1-1 Controller (HSP-100S(SH)) ................................................................................. 7
1-2 Sensor head......................................................................................................... 8

2. Measurement method ................................................................................ 17
2-1 Setting and measurement flow........................................................................ 17
2-2 Basic operation ................................................................................................. 19
2-2-1 Initial screen (after power supply is turned ON)......................................... 19
2-2-2 Measurement screen ..................................................................................... 20
2-3 Setting menu...................................................................................................... 24
2-3-1 Menu configuration........................................................................................ 24
2-4 Measurement result screen.............................................................................. 54
2-5 Other ................................................................................................................... 58
2-5-1 Remote mode setting .................................................................................... 58
2-5-2 Release of remote mode ............................................................................... 58

3. Connection of external device .................................................................. 59
3-1 I/O interface........................................................................................................ 59
3-2 Analog output .................................................................................................... 64
3-3 Serial interface................................................................................................... 65
3-3-1 Specifications................................................................................................. 65
3-3-2 Functions ........................................................................................................ 66

4. Other............................................................................................................ 70
4-1 List of error displays......................................................................................... 70
4-2 Troubleshooting ................................................................................................ 71
4-3 System specifications ...................................................................................... 72

5. Appendix ..................................................................................................... 73
5-1 Data collection sample program...................................................................... 73
5-1-1 Description of operation ............................................................................... 73
5-2 Screen image data acquisition program......................................................... 74
5-2-1 Startup............................................................................................................. 74
5-2-2 Description and operation ............................................................................ 74
5-3 Procedure for updating the firmware.............................................................. 75
5

SG13-113-001

6. Guarantee and after-the-sale service........................................................ 78

6

SG13-113-001

1. Name and function of each part
1-1 Controller (HSP-100S(SH))
Touch panelNote) When the product is shipped fromfactory, the calibration is carried out incombination of head and controller.
If the combination of head and controller
is changed, the measurement error isgenerated.

Note) Connect and disconnect itwhen the power supply of thecontroller is turned OFF.

Analog output

RS-Ｙ3ＹC

Head I/F connector
To sensor head

AC inletI/O terminal block
Power

No.

Name
Display / touch panel
Head I/F connector
I/O terminal block

Description
Touch panel for setting
Connected to sensor head with a dedicated cable
General-purpose I/O and external synchronous
input terminal
Applicable connector: XW4B-10B1-H1 (made by
Omron)
Power switch
ON/OFF switch of AC power supply
Analog output (BNC connector) Connect an oscilloscope etc. (300Ω)
RS-232C
Dsub 9-pin connector
AC inlet (3P)
AC100-240V(50/60Hz)
7

SG13-113-001

1-2 Sensor head
H900-P017C
Angle range: ±0.17deg

Light source (wavelength): red semiconductor laser(658nm)

Maximum laser output: 5.0mw or less (Typ2.5mW class 3R)

Outgoing beam diameter: Φ1.0mm or less (beam window 1/e2)

External dimensions: 162x269x87mm (only main unit)

Weight: 4.1 Kg

Recommended use environment: 20±3°C (calibration temperature: 20±1°C)

Storage environment: 10 to 40°C (no dew condensation)

Accuracy assurance WD: 230±30mm

Remark: CCD camera attached to external

3-Φ8 depth 69(hole for fixing sensor head)

図 1. 外形図* For the bolt used for the sensor head fixation hole, use the bolt whose length is longer thanthat of hexagon socket bolt M4x25 (3 pieces).

8SG13-113-001

Φ6H7 depth (positioning hole x2)

4-M4 depth 5

Camera attachment port

図 2. 取付寸法図9SG13-113-001

Figure 3. I/F part of head
- Controller I/F connector (CONTROLLER)
Connect the sensor head cable.
Note) Be sure to turn OFF the power supply of the controller before connecting or
disconnecting the cable.
When the product is shipped from factory, the calibration is carried out in the
combination of head nad controller. If the combination of head and controller ischanged, measurement error is generated.

10

SG13-113-001

H900-P017
Angle range: ±0. 17deg

Light source (wavelength): red semiconductor laser (658nm)

Maximum laser output: 5.0mw or less (Typ2.5mW class 3R)

Outgoing beam diameter: Φ1.0mm or less (beam window 1/e2)

External dimensions: 162x269x87mm (only main unit)

Weight: 4.1 Kg

Recommended use environment: 20±3°C (calibration temperature: 20±1°C)

Storage environment: 10 to 40°C (no dew condensation)

Accuracy assurance WD: 230±30mm

Figure 4. External view11SG13-113-001

Figure 5. Attachment dimension diagram* The position and dimensions of sensor head attachment hole and positioning hole
are common to those of H900-P017C.

- Controller I/F connector (CONTROLLER)
Connect the sensor head cable.
- Sense Out
The received light amount monitor output signal is output.
- Sync Out (PD)The polygon mirror surface detection signal is output.
Note: The output impedance of each output terminal is 50Ω. At the connection to a
device such as an oscilloscope, set the input to high impedance.

12

SG13-113-001

H900-P050C, H900-P090C
Angle range: ±0. 5deg (050C), ±0. 9deg (090C)

Light source (wavelength): red semiconductor laser (658nm)

Maximum laser output: 5.0mw or less (Typ2.5mW class 3R)

Outgoing beam diameter: Φ1.0mm or less (beam window 1/e2)

External dimensions: 116.8x200.3x88.3mm (only main unit)

Weight: 1.8 Kg

Recommended use environment: 20±3°C (calibration temperature: 20±1°C)

Storage environment: 10 to 40°C (no dew condensation)

Accuracy assurance WD: 150±30mm

Power supply: externally supplied by controller

Remark: equipped with a built-in CCD camera

2-Φ8.5 depth 8.5(hole for fixing sensor head)

図 6. 外形図* For the bolt used for sensor head fixation hole, use the bolt whose length is longer thanthat of hexagon socket bolt M4x25 (2 pieces).

13

SG13-113-001

Figure 7. I/F part of head
- Controller I/F connector (CONTROLLER)
Connect the sensor head cable.
- VIDEO
The video signal of CCD camera is output (BNC connector).

Note) Be sure to turn OFF the power supply of the controller before connecting or
disconnecting the cable.
When the product is shipped from factory, the calibration is carried out in the
combination of head nad controller. If the combination of head and controller ischanged, measurement error is generated.

14

SG13-113-001

Φ6H7 depth 5(positioning hole x2)

4-M4 depth 5

Figure 8. Attachment dimension diagram15

SG13-113-001

How to use the target for adjusting the light axis

Target for adjuring light axis

Outgoing beamReflection beam

Surface to be measured

Note) The target is common to allmodelsUsing the included target for adjusting the light axis simplifies the light axis adjustment
at installation.
Procedure of adjustment
1. Attach the target for adjusting the light axis to the sensor head so that the outgoing
beam passes through the central opening part (Φ1mm) of the target for adjusting
the light axis.
2. Adjust the tilt of sensor head so that the reflection beam passes through the central
opening part of the target for adjusting the light axis.
3. Carry out the following fine adjustment while checking the monitor screen of thecontroller.

16G-008-0011

2. Measurement method
2-1 Setting and measurement flow
1) In standard measurement mode
Power ONNo
Existing setting

P24

P32

P31

Refer to "2.3 Setting menu"

Adjustment of light intensity

Measurement sensor alignment

START button

STOP button* The external control by I/O interface or communication command can be carried out.
(Refer to page 60).

17

G-008-0011

2) In motor, polygon mirror measurement mode
Power ONNo
Existing setting

P32
Adjustment of light intensity

P24

Refer to "2.3 Setting menu"

P31
Measurement sensor alignment

Motor set

Motor rotation

START button
Automatic STOP after specified number of samples are measured

Measurement data output(when serial output ON)

Motor stop

* The external control by I/O interface or communication command can be carried out.
(Refer to page 59)18

G-008-0011

2-2 Basic operation
2-2-1 Initial screen (after power supply is turned ON)
Title display[Stop]

Start
/Stop
SetUp
ResultDisplay7

RemoteHEAD-017
S/W Ver3.40
H/W Ver3.10
Measurement image display

Version display: The content displayed on the screen is indicated.
: The measurement image is displayed.
: The software (S/W) version and the hardware (H/W) version of main unit are displayed.
: Measurement start / stop button (refer to page 20): Measurement condition set button (refer to page 27): Measurement result display button (refer to page 54): Remote mode switching button (refer to page 58)

19

G-008-0011

2-2-2 Measurement screen
If Start/Stop button is pressed, the measurement is started. If the button is pressed again, themeasurement is stopped.
1) Standard measurement mode
Received light level[Standard]

Start
/Stop
Esc

Ms
Set

X: 0.07202
Y:-0.08101
D: 0.10839

NG
Judgment result

Measurement data

: Start/Stop button
Measurement is started / stopped.
: SetUp button
The screen is switched to parameter setup screen directly. If it is pressed during measurement,
the measurement is stopped.
: Esc button
The screen is switched to main screen.
: OK/NG judgment range (circle or rectangle) ............ Refer to page 36: Light receiving level during measurement (bar graph)
Green:

Amount of received light is within proper range

Red:

Amount of received light is low or excessive: Judgment result (OK or NG) ..................................... Refer to page 36: Measurement value or measurement result (up to 10 items selected for display menu are
displayed)
20

G-008-0011

2) Motor measurement mode
Received light level[Motor]

Start
/Stop
Esc

T
D
W

TX: 0.04101
TY: 0.00801
TD: 0.04179

NG
Judgment result
to

,

, and

Ms
Set

Measurement data

shown below are same as those of 1) described above.

: Start/Stop button: SetUp button: Esc button: Light receiving level during measurement (bar graph): Judgment result (OK or NG)(Judgment results of

,

, and

are OR-judged and displayed): Measurement value or measurement result (up to 10 items selected for display menu are
displayed)* For the initial setting, axis fallen (TX, TY, TD) is displayed.
: Judgment circle for axis fallen (gravity center) .................................Red: Judgment circle for outermost point (pale blue): Judgment circle for amplitude (center of circle is gravity center) .....Red purple: Outermost point.................................................................................Pale blue
: Axis fallen (gravity center).................................................................Red: The NG item for the judgment of T = axis fallen , D = outermost point, and W = amplitude isdisplayed in red.
21

G-008-0011

3) Polygon mirror measurement mode
Received light level[Polygon]

Start
/Stop
Esc

Ms
Set

PP
WA
PX
X: 0.00085+Y: 0.04101-Y: 0.00239

OK
Judgment result

to

,

, and

Measurement data

shown below are same as those of 1) described above.

: Start/Stop button: SetUp button: Esc button: Light receiving level during (bar graph): Judgment result (OK or NG)(Judgment results of

,

, and

are OR-judged and displayed): Measurement value or measurement result (up to 10 items selected for display menu are
displayed)* For the initial setting, X (present value X), +Y (maximum Y value), and -Y (minimum Y value)
are displayed.
: Judgment range of P-P
Indicated with upper and lower red lines around (maximum value + minimum value)/2 based on
the measurement result.
⑨: The NG item for the judgment of PP=P-P, WA= width of average face value and PX= maximum
value of proximal angle difference is displayed in red.

22

G-008-0011

4) Repeated measurement screen (e.g.: motor measurement)This is the operation mode that automatically repeats the measurement.
After 4096 sample data is obtained after the measurement is started, the operation to stop themeasurement and display the result is repeated.
the period after measurement stop to next measurement start is 200msec.

[Repeat]

Start
/Stop
Esc

Ms
Set

T
D
W
TX: 0.04101
TY: 0.00801
TD: 0.04179

NG* If the measurement is stopped during measurement by Stop button, Stop I/O or Stop command, themeasurement is stopped after 4096 sample data are obtained.

23

G-008-0011

2-3 Setting menu
2-3-1 Menu configuration
The configuration of setting menu is shown in the figure below.

SetUp

MeasureSet

MeasMode

ZeroSetLD
PowerStandard
Motor
PolygonRepeatSet
Reset
ManualAuto
Detect Level

Trace

On
Off

Zoom

FactorPosition

OK/NG

Off
*1

Display

DataNo*1

DataNo00000001～99999999

SYNC

INT
EXT1
EXT2
EXT1&2

OutputCH1
CH2

MarkerOn
Off

Mirror

File

Save
Load

24

Off
X
Y
X-Y

G-008-0011

Unit

Deg
Sec

Com

9600
19200

Seri-OutOn
Off

Others

21
○

22
○

I/O

*1 The content in low order varies depending on the operation mode.

25

Mode-1Mode-2

G-008-0011

Configuration table
No.

Name of button

Description

Page

SetUp

Top order of setting menu
Setup screen for measurement condition, item related to file, and P.27
other items

Measure Set

Measurement condition item setup screen

MeasMode

Measurement mode setup screen(standard measurement, motor measurement, polygon mirror
P.30
measurement)
Repeated measurement mode setting

ZeroSetMeasurement value zero setup screen

P.31

LD Power

LD power adjustment & received light level setup screen

P.32

Trace

Screen display method selection screen

P.34

Zoom

Zoom display method setup screen

P.35

OK/NG

Judgment condition screen

P.36

Display

Measurement result item display setup screen

P.41

DataNoData number setup screen

P.44

SYNC

Sampling mode setup screen

P.45

OutputAnalog output setup screen

P.46

MarkerMarker display setup screen

P.47

MirrorMirror display method setup screen

P.47

File

File operation screen

P.48

Save

File saving

P.49

Load

File reading

P.50

OthersOther setup screen (unit setting, communication speed setting,
P.51
data output setting)

Unit

Unit setup screen

P.51

Com

Serial communication speed setup screen

P.52

21
○

Seri-Out

Serial data output setup screen

P.52

22
○

I/O

I/O mode setup screen

P.53* MS Set button on the measurement screen is same as Measure Set button.

26

P.29

G-008-0011

SetUp screen
Setup menu display screen[SetUp]Esc
MeasureSet

To main screen

To measurement condition screen
To setting saving / reading screen

File
P.48
To other setup screen

OthersP.5Ｘ

MeasureSet screen
This is the setup menu screen related to measurement. There are three screens.
-1 MeasureSet1 screen[MeasSet]

Esc
MeasureMode

To SetUp screen
To measurement mode selection screen
P.Ｙ9
To measurement origin setup screen

ZeroSet
LD
Power

P.3Ｘ
To LD power adjustment screen
P.3Ｙ
To trace selection screen

Trace
Off
>>>

P.34
To MeasureSetＹ screen* The yellow characters in the lower part of the button indicate the present setting.

27

G-008-0011-2 MeasureSet2 screen[MeasSet]
To SetUp screen P.Ｙ7

Esc
Zoom
x4
OK/NG
On
Display

To zoom method selection screen
P.35
To judgment range setup screen
P.36
To result display item selection screen
P.4Ｘ
To data number setup screen P.44

DataNo00000001<<<

To MeasureSet3 screen>>>
To MeasureSetＸ screen* The yellow characters in the lower part of the button indicate the present setting.

-3 MeasureSet3 screen[MeasSet]

Esc
SYNC

To SetUp screen P.Ｙ7
To synchronous mode selection
screen P.45
To analog output selection screen

Output1:D 2:2:-

P.46
To marker setup screen P.47

MarkerTo mirror setup screen P.47

MirrorTo MeasureSetＹ screen<<<* The yellow characters in the lower part of the button indicate the present setting.

28

G-008-0011

Measurement mode selection screen
Measurement mode (application) selection screen[Mode]

Esc

Standard

To MeasureSetＸ screen P.Ｙ7

Standard measurement
Motor measurement

Motor
Polygon mirror measurement

PolygonRepeated measurement setting

RepeatOff

On: set
Off: not set

P.Ｙ4-1 Motor measurement setup screen
To measurement mode selection[Mode]

Esc
rpm
5400

screenP.Ｙ9Motor's rotation frequency
Input from a numeric keypad
Sampling data count / rotation

Smpl Num
1000

Input from a numeric keypad
Number of measurement laps

Rev Num
4
FG Num
6
90.09
[KHz]

Input from a numeric keypad
FG pulse count / rotation
Input from a numeric keypad
Measurement frequency*Ｙ，3［MAX：Ｙ50or500KHｚ］*1 The number of sampling data per measurement is up to 4096.
Carry out the setting so that it becomes Smpl Num x Rev Num ≤ 4096.
*2 To minimize the misalignment of sampling timing per lap, the number of sampling data per rotation is
automatically corrected to a value near setting value. If the number of sampling data per rotation
is not divisible by FG pulse count, it is automatically corrected to a divisible value.
*3 If it is set to a value exceeding the internal sampling frequency 250or500KHz, an error message isdisplayed.
*4 If FG pulse count is set to 0, the synchronous mode is set to internal synchronous mode (250 or
500KHz).
If it is set to 1 or more, it is set to external synchronous mode.

29

G-008-0011-2 Polygon mirror measurement setup screen
To measurement mode selection screen[Mode]

Esc

Setting of number of faces (Ｙ to Ｙ4)

Facet
4

Input from a numeric keypad
Setting of measurement lap

Rev Num
1024

Input from a numeric keypadMotor rotation frequency setting *Ｙ

rpm
30000

Input from a numeric keypad
Setting of motor's rotating direction *Ｙ
Input from a numeric keypad

CW/CCWCW*1*Ｘ

The number of sampling data per measurement is up to 4096.
Carry out the setting so that it becomes Facet x Rev Num ≤ 4096.
If the total number of data exceeds 4096 when Facet is changed, Rev Num is automaticallycorrected.

*2

Items rpm and CW/CCW are not related to the measurement conditions.
(They are added to the serial output data as setting information)

Input from a numeric keypad screen[Mode][

4 -Input range is displayed

24]

Input data display area

4

7

8

9

ESC

4

5

6

CL

ESC: cancel
CL : clear
BS : backspace

1

2

3

BS
ENT: enter

0

-

.

ENT

30

G-008-0011

Zero set screen
Change the measurement standard (zero) point.
-1 Set screen[ZeroSet]

Esc

To MeasureSetＸ screen

Set

Set processing is carried out

P.Ｙ7

Reset processing is carried out

Reset

X: 0.00000
Y: 0.00000
D: 0.00000
Set button: The present measurement value is forcibly reset to zero.
The measurement standard line (white) and the judgment range display move.
* If the light spot is out of area or the amount of received light is not normal value, Zero set cannot be
executed.

-2 Reset screen
To MeasureSetＸ screen P.Ｙ7

[ZeroSet]

Esc

Set

Set processing is carried out

Reset

Reset processing is carried out

X: 0.04000
Y: 0.04000
D: 0.05657
Reset button: The measurement standard is set to the measurement origin (center of screen).
The measurement standard line and the judgment range display are moved tothe measurement origin (center of screen).

31G-008-0011

Laser power adjustment screen
Carry out adjustment of laser power and error level setting for amount of received light.
To MeasureSetＸ screen P.Ｙ7

[LDPower]

Esc
To laser power manual adjustment screen

Manual
Auto
On

P.33
Laser power automatic adjustment *Ｘ
Received light level setting

DetectLevel

Input from a numeric keypad *Ｙ*1 If the laser power automatic adjustment is set to ON, the adjustment is carried out automaticallywhen the measurement is started.
However, the automatic adjustment is not carried out automatically in the repeat mode.
*2 The received light level becomes an error if the amount of received light becomes smaller than
this value.
The setting range is 3000 to 8000 (default: 3000).

32

G-008-0011

Manual setup screen
Adjust the laser power manually so that the amount of received light becomes the optimum value.
If the amount of received light becomes smaller than error level or exceeds the maximum amount ofreceived light (8191), the level bar changes to red.
* In the polygon mirror measurement mode, set it while rotating the polygon motor.
To laser power adjustment screen[LDPower]

Esc

P.3Ｙ
Increase the laser power

Up

Down

Decrease the laser power
Laser power automatic setting

AutoSet
PSD :5350
LDPW :600
LDMON:5300

Amount of received light is displayed asvalue
LD power internal setting value
LD power monitor value
Maximum received light level :8Ｘ9Ｘ

Optimum received light level (5300)
Received light level(3000 to 8000)*

The amount of received light can be measured if the level bar is green, however, set it toapproximately 5300 as an optimum value (refer to the figure above).

* If AutoSet button is pressed, the laser power is automatically adjusted so that the received lightlevel becomes within 5300±50. If the automatic adjustment cannot be carried out, an error
message is displayed.
* On this screen, a track of cross pointer is left.

33G-008-0011

Trace (display method selection) screen
Set the method for displaying the measurement value (polygon mirror measurement mode is invalid).
e.g.: trace OFF[Trace]To MeasureSetＸ screen P.Ｙ7

Esc

Measurement value is displayed as a dot

On(track)Measurement value is displayed as aOffcross pointerCross pointere.g.: trace ON[Trace]

Esc

On

Off

Dot track* If the standard measurement is changed to the motor measurement, the trace function is
automatically set to On.

34

G-008-0011

Zoom method selection screen
An image can be enlarged after the measurement is stopped by setting magnification and spreading
center position.
[Zoom]

Esc
Factorx4
Position
Point

To MeasureSetＸ screen P.Ｙ7
To zoom magnification setup screen
TO spreading center position setup
screen-1 Zoom magnification setup screen[Zoom]EscOff

To zoom method selection screen
P.35
No zoom display (Ｘx)
Ｙx displayx2
4x displayx4-2 Spreading center position setup screen[Zoom]

Esc

To zoom method selection screen
P.35
Set the position touched in the screen is

Touch

set to center
After the measurement is stopped, an image

Point

is automatically enlarged.
the center position is set depending on themeasurement mode as shown below.
・Standard：final measurement value・Motor：gravity center position

・Polygon ：X, Y average value

35

G-008-0011

Judgment range (OK/NG) screen
Set the judgment value for evaluating OK/NG.
-1 OFF selection screen: standard measurement mode
If Off is selected, the judgment processing is not carried out.
[OK/NG]Esc

To MeasureSetＹ screen P.Ｙ8

OffCircleX-Y-2 Judgment circle setup screen: standard measurement mode
Set the judgment value within the range of circle.
[OK/NG]Esc

To MeasureSetＹ screen P.Ｙ8
Select whether there is judgment

OffCircle0.085

range
Input the angle equivalent to radius
Input from a numeric keypad
To rectangle setup screen

X-Y

36

G-008-0011-3 Rectangle (X-Y) setup screen: standard measurement mode
Set the judgment value within the range of rectangle.
The positional relationship of XH (X upper limit), XL (X lower limit), YH (Y upper limit), and YL (Ylower limit) are shown in the figure below. The relationship is represented as XH> XL, YH > YL.
X-MIN

X-MAX

To judgment range (OK/NG)[OK/NG]

Esc

screen
XH value

XH
0.085

Input from a numeric keypad

XL-0.085

Input from a numeric keypad⑯-④A⑮

XL value

YH value

YH
0.085
⑯-④I⑤

Input from a numeric keypad
YL value

YL-0.085* The present setting value is displayed in the lower part in the button

37

Input from a numeric keypadG-008-0011-4 Judgment range setup screen: motor measurement mode
In the motor measurement mode, total five types of judgment conditions in three patterns can be set.
To MeasureSetＹ screen P.Ｙ8

[OK/NG]

Esc
TILT
0.200
MAX_D
0.350
WIDTH
0.010

Axis fall judgment
Input from a numeric keypad
Outer most point judgment
Input from a numeric keypadToamplitude
width
selection screen P.39

Axis fallen judgment value:
The axis fallen (gravity center) angle is treated as a judgment value.
If the setting value is exceeded, it becomes NG.
Outermost point judgment value:
The maximum value (D) of measurement value is treated as a judgment value.
If the setting value is exceeded, it becomes NG.

38

judgment

G-008-0011-5 Judgment range setup screen: motor measurement mode (amplitude selection screen)
When the amplitude is selected, the judgment condition for maximum value or width of amplitude
can be selected.
Amplitude selection screen[OK/NG]

Esc-4 To judgment range setup screen
P.38

1-Point
0.200

Amplitude maximum value judgment
Input from a numeric keypad

2-Point
0.350

Amplitude width judgment
Input from a numeric keypad

The amplitude judgment can be selected from two methods.
Amplitude maximum value: The width between axis fallen (gravity center) and most distantmeasurement point is treated as a judgment value.
Amplitude: The width between two points; most distant measurement point from axis fallen(gravity center) and most distant measurement point from this point is treated as a
judgment value.

In each case, if the setting value is exceeded, it becomes NG.

39

G-008-0011-5 Judgment range setup screen: polygon mirror measurement mode
In the polygon mirror measurement mode, three patterns of judgment method can be selected.
[OK/NG]Esc

To MeasureSetＹ screen
P.Ｙ8

P-P
0.036

General face fall judgment
Input from a numeric keypad

W AVG
0.020

Average face fall judgment
Input from a numeric keypad

PRXIMAL
0.010

Maximum proximal face difference judgment
Input from a numeric keypad• General face tangle judgment:
The width of sampling data value (maximum value - minimum value) is treated as a judgment
value.
• Face average face tangle judgment:
The width (maximum value - minimum value) of average value (average face value) of sampling
data for each face is treated as a judgment value.
• Maximum proximal face difference judgment:
The maximum value of proximal face difference depending on average face value is treated asa judgment value.

40

G-008-0011

Measurement result item display setup screen
Up to 10 items to be displayed on the measurement screen can be selected. The content varies
depending on the measurement mode.
Standard measurement mode
To MeasureSetＹ screen[Display]

Esc

P.Ｙ8

The item to be displayed at
YX

D

DataNomeasurement is displayed inpressed status.

MAX_X

MIN_X

WIDTH_X

MAX_Y

MIN_Y

WIDTH_Y* The selected item on the left figure is
the initially selected item

Content of all items
Name of item
DataNoXYDescription
Data number
Measurement
direction)
Measurement
direction)value(X-axisvalue(Y-axisD

Measurement value

MAX_X

Maximum X value

MIN_X

Minimum X value

WIDTH_X

Name of item

X width (maximum X value minimum X value)

41

Description

MAX_Y

Maximum Y value

MIN_Y

Minimum Y value

WIDTH_Y

Y width (maximum Y value minimum Y value)G-008-0011

Motor measurement mode
To MeasureSetＹ screen[Display]

Esc
Esc

P.Ｙ8

X

Y

D

MAX_X

MIN_X

WIDTH_X

MAX_Y

MIN_Y

WIDTH_Y

TILT_X

TILT_Y

TILT_DMAXD_XMAXD_YMAXD_D

DataNoThe item to be displayed atmeasurement is displayed inpressed status.

WIDTH* The selected on the figure above is the initially selected item
Content of all items
Name of item
DataNoXYDescription

Name of item

Data number
Measurement
direction)
Measurement
direction)

WIDTH_Yvalue(X-axisvalue(Y-axisTILT_X
TILT_Y

Description
Y width (maximum Y value minimum Y value)
Axis fallen (X value at gravity
center)Axis fallen (Y value at gravity
center)Axis fallen (D value at gravity
center)D

Measurement value

TILT_D

MAX_X

Maximum X value

MAXD_X

Outermost point (X value)MIN_X

Minimum X value

MAXD_Y

Outermost point (Y value)

WIDTH_X

X width (maximum X value minimum X value)

MAXD_D

Outermost point (D value)

MAX_Y

Maximum Y value

WIDTH *1

Maximum Amplitude

MIN_Y

Minimum Y value*1 The content is displayed following the amplitude judgment condition.

42

G-008-0011

Polygon mirror measurement mode
To MeasureSetＹ screen[Display]

GRAPHIC

Esc

P.Ｙ8

X

Y

D

MAX_X

MIN_X

WIDTH_X

MAX_Y

MIN_Y

WIDTH_Y

P-P

W_AVG

PROXIMAL

DataNo* The selected item in the figure above is the initially selected item
Content of all items
Name of item
Data NoX
Y

Description

Name of item

Data number
Measurement
direction)
Measurement
direction)value(X-axisvalue(Y-axisMAX_Y

Maximum Y value

MIN_Y

Minimum Y value

WIDTH_Y *1

DMeasurement value

P-P *1

MAX_X

Maximum X value

W_AVG

MIN_X

Minimum X value

PROXIMALWIDTH_X

Description

X width (maximum X value GRAPHIC *2
minimum X value)

Y width (maximum Y value minimum Y value)
Y width (maximum Y value minimum Y value)
Width of average face value
Maximum value of proximal facedifference
Graph screen is preferentiallydisplayed*1 WIDTH_Y and P-P indicate the same value.
*2 If this button is set, the graph screen is displayed first when the result display screen is displayed.

43

G-008-0011

Data number setup screen
Set the data number to be added to the measurement data as measurement information.
(Input range: 00000001 - 99999999)
The data number is 8-digit number starting from 0.
e.g.: If 4 is input, the data number is set as 00000004.
[MeasSet]

Input range is displayed[00000001-99999999]

Input data display area

00000004

7

8

9

ESC

4

5

6

CL

1

2

3

BS

0

-

.

ENT

* The data number increases one at a time when the measurement is terminated.

44

G-008-0011

Synchronous mode selection screen
Select the synchronous mode for sampling timing at the measurement.
Standard measurement or motor measurement mode
[SYNC]Esc

To MeasureSetＹ screen
P.Ｙ8

INT

Internal synchronous mode
External synchronous mode
Invalid
Invalid

Polygon mirror measurement mode
To MeasureSetＹ screen[SYNC]

Esc

INT

P.Ｙ8

Invalid
Invalid
Polygon measurement mode
Polygon external synchronous mode

* When the polygon measurement mode is selected, EXT2 (face detection signal) is automaticallyselected.

45

G-008-0011

Analog output selection screen
Set the output corresponding to each channel for analog output.
[AnalogOut]

Esc

To MeasureSet3 screen
P.Ｙ8

CH1
X

To output item selection
screen of each CH

CH2Y
The present value is displayed in
the lower part in the button.

Output content selection screen

To analog output selection screen[AnalogOut]

Esc

P.46

Off

No output

Xvalue output

Yvalue output
Ｄ value output

D* For the analog output, refer to page 64.

46

G-008-0011

Marker setup screen
Carry out the setting if you want to display an arbitrary value (circle) on the screen from themeasurement standard regardless of judgment.
[Marker]

Esc

To MeasureSet3 screen
P.Ｙ8
Marker display selection

On
To numeric keypad inputOff

screenMarker display
Display in arbitrary size within field
circle is available

Mirror display method setup screen
Set the method for inverting video in X and Y directions.
[Mirror]Esc

47

To SetUp screen

Off

P.Ｙ7
No reverse

X

Reverse in X direction

Y

Reverse in Y direction

X-Y

Reverse in X-Y direction

G-008-0011

File (setting saving / reading) screen
Execute saving or reading of various setting data.
[File]Esc

To SetUp screen
P.Ｙ7

48

Save

To Save screen
P.49

Load

To Load screen
P.50

G-008-0011

Save screen
The present setting can be saved in a file (maximum 6 items).
Press the button and specify the file name.
To file screen[File]Esc

P.48

SURUGA_1
To file name input screen

SURUGA_2
Specify the destination to save and go

SURUGA_A
to character input screen(Aduplicative

file

name

can

be

specified)Finally, the button of saved or loaded
file is displayed in pressed status.
* At the overwrite save, the confirmation message shown in the figure below is displayed.
When you carry out overwrite save, press OK button.

-1 File name input screen[File]SURUGA_G- Alphabet character string input(maximum 8 characters)

A

B

C

D

E

F

BS

CL

ESC

G

H

I

J

K

L

7

8

9

M

N

O

P

Q

R

4

5

6

S

T

U

V

W

X

1

2

3

Y

Z

_

.

-

+

0

ESC: cancel
CL: clear
BS: backspace

ENT

49

ENT: enterG-008-0011

Load screen
Select a saved file and read the setting data.
To file screen[File]Esc

P.48

SURUGA_1- Save character string button isdisplayed

SURUGA_2

SURUGA_G

SURUGA_A
The button of finally saved or loaded
file is selected and displayed.

50

G-008-0011

Other setup screen
Carry out the setting of display unit, communication speed, and data output.
To SetUp screen[Others]

Esc

P.Ｙ7
To unit selection screen

Unit
Deg
Com
19200
SeriSeri-Out
Out
On
I/O
ModeMode-1

P.5Ｘ
To communication speed selection
screen P.5Ｙ
Ｙ
○Ｘ To data output selection screen
P.5Ｙ
Ｙ○Ｙ To I/O mode selection screen
P.53

Unit selection screen
Select the unit for displaying the measurement result.
[Unit]Esc

To other setup screen
P.5Ｘ

Deg

Degree unit display
Minute / second unit display* The currently set button is pressed.

Degree unit: ±0. 00000 display
Minute / second unit: ±00'00. 0 display51

G-008-0011

Communication speed selection screen
Select the baud rate when outputting data.
[Com]

Esc

9600

To other setup screen
P.5Ｘ
9600bps
Ｘ9Ｙ00bps

21 Data output selection screen○

Select whether the serial output of measurement data is executed when the measurement is
stopped (terminated).
[Seri-Out]Esc

To other setup screen
P.5Ｘ

On

* The currently set button is pressed.

On: The measurement result is sent once when the measurement is terminated.
For the sent data, refer to the communication interface manual.
Off: The serial data output is not carried out.

52

G-008-0011
22 I/O mode selection screen
○

[I/O]

Esc

To other setup screen
P.5Ｘ

ModeMode-1

Mode-Ｘ
P.59
Mode-Ｙ
P.60

53

G-008-0011

2-4 Measurement result screen
The data of up to 100 measurements (not sampling data) is collectively displayed.
However, the data is memorized in the volatile memory, so the data is cleared if the power supply isturned OFF.
If Esc button on the measurement result screen in each mode is pressed long for three seconds or
more, the data clear confirmation message is displayed. If OK button is pressed, the data is cleared.
The display unit follows the unit setting (Deg or Sec).
1) Measurement result screen: standard measurement mode

: The screen returns to the main menu.
: The data number is displayed.
: The item names of X, Y, and D are displayed.
: The maximum values of X, Y, and D are displayed.
: The maximum values of X and Y are displayed.
: The widths of X and Y (maximum value - minimum value) are displayed.
: The previous data is displayed.
: The next data is displayed.
: The data number and the measurement result that became NG in the judgment are
displayed in red.

54

G-008-0011

2) Measurement result screen: motor measurement mode

[MeasDisp]
Esc

DataNo
MAX_X
MIN_X
MAX_Y
MIN_Y
MIN_Y
TILT_X
TILT_Y
TILT_DMAXD_XMAXD_YMAXD_D
WIDTH

00000001
0.234-0.2340.232-0.2120.057-0.081
0.099
0.222-0.2020.300
0.14600000002
0.254-0.2540.254-0.2500.112-0.081
0.138
0.232
0.232
0.236
0.331
0.231

00000003
0.102-0.2120.119
0.031-0.159
0.059
0.170
0.094
0.100
0.137
0.114

: The screen returns to the main menu.
: The data number is displayed.
: The maximum value of X is displayed.
: The minimum value of X is displayed.
: The maximum value of Y is displayed.
: The minimum value of Y is displayed.
: Axis fallen (gravity center) X value is displayed.
: Axis fallen (gravity center) Y value is displayed.
: Axis fallen (gravity center) D value is displayed.
: X value at outermost point is displayed.
: Y value at outermost point is displayed.
: D value at outermost point is displayed.
: The maximum amplitude is displayed (following amplitude judgment condition).
: The previous data is displayed.
: The next data is displayed.
: The data number and the measurement result that became NG in the judgment are
displayed in red.

55

G-008-0011

3) Measurement result screen: polygon mirror measurement mode (proximity difference: PROXIMAL
display)[MeasDisp]
Esc

P-P
AVG
No
1
2
3
4
5
6
7
8

DataNoDataNo00000001

MAX
-79.0
-80.7
MAX
-84.5
-79.0
-101.2-112.4-113.8-122.1
-80.1
-92.4

MIN
-128.0-124.2
MIN
-91.5
-90.1
-108.2-119.3-128.0-128.0
-85.6
-95.6

D/G

WIDTH
MAX_PROX
49.1
43.6
38.2
AVG
PROXIMAL
-86.1
5.4
-80.7
23.9
-104.513.8-118.3
2.1-116.28.0-124.2
38.2
-82.2
11.1
-93.3
7.2

: The screen returns to the main menu.
: Data and graph are switched.
: Maximum value of sampling data
: Minimum value of sampling data
: Width of sampling data (calculating formula ｜ - ｜) ..........object to be judged (WIDTH
P-P): Maximum value of average face value: Minimum value of average face value: Width of average face value (calculating formula ｜ - ｜) ..object to be judged (WIDTH
AVE): Maximum value of proximal face difference .............................object to be judged(PROXIMAL): Maximum value for each face
: Minimum value for each face
: Average value for each face (average face value): Proximal face difference (calculating formula ｜ n - n+1｜): Face number: Displays the previous measurement data
: Displays the next measurement data
: Displays the previous face number data
: Displays the next face number data
: The data number and the measurement value that became NG in the judgment are
displayed in red.
* If you touch PROXIMAL item, the display is switched to SD (standard deviation).
56

G-008-0011

4) Measurement result graph display screen: polygon mirror measurement mode

[Graphic]
Esc
DataNo
PP
sec
-50

D/G

00000001

49.1 WA

43.6 PX

38.2

-70
-90
-110
-130
-150
1

2

3

4

5

6

7

8

: The screen returns to the main menu.
: Data and graph are switched.
: Width of sampling data (above-referenced): Width of average face value (above-referenced): Maximum value of proximal face difference: Face tangle result mark (refer to the figure shown below): Y-axis item (face tangle value: second unit): X-axis item (face number: 2 to 24 faces): The previous data is displayed.
: The next data is displayed.
: The data number and the measurement result that became NG in the judgment are
displayed in red.
④ark diagram④aximum face value

Average face value④inimum face value* If the operation is stopped by pressing the button before the number reaches the set numberof samples, the data number and the measurement result are displayed in red.
The mark on the graph is displayed in red purple.

57

G-008-0011

2-5 Other2-5-1 Remote mode setting
If OK button is pressed for the confirmation message after the Remote button is pressed on the main
screen, the system enters remote status. I/O interface input or communication command input is activatedand the screen input from the touch panel is disabled.
("*" is added to the beginning of the title and the title characters changes to pale blue.)
As the status in remote mode is memorized, the system is started up in remote mode when the power
supply is turned ON next time.

[Stop]
Stop]

Start
/Stop
SetUp
ResultDisplay⑨emote button

Remote2-5-2 Release of remote mode
Press Esc button on the screen long for four seconds or more while the measurement is stopped.
If the remote mode is released the screen returns to the main screen.
Stop status[*Stop]*Stop]

Start
/Stop
Esc

Ms
Set
Release button

T
D
W

NG

TX: 0.04101
TY: 0.00801
TD: 0.04179

58

G-008-0011

3. Connection of external device
3-1 I/O interface
The removable terminal block is equipped with control I/O and high-speed input shown in the table below.
For the wiring, refer to the interface circuit diagram shown in page 63.
1) When mode 1 is selected
SignalnameContent of signal

IN1

Measurement startIN2

Measurement stop

IN3

Data output

IN4

IN5

OUT1

OUT2

Description

Remark (execution condition)

Switchedtomeasurement
screenSwitched to measurement stop
screen1 measurement result is output
per input

Executed
only
while
the
measurement is stopped
Executed
only
duringmeasurement
Executed during measurement orwhile the measurement is stopped
Executed
only
while
the
measurement is stopped
If it is set to ON, the screen shifts
to zero set screen
If it is set to OFF, zero set
processing is carried out
Executed
only
while
the
measurement is stopped
If it is set to ON, the screen shifts
to zero set screen
If it is set to OFF, zero reset
processing is carried out

Zero set

Equivalent processing to that of
ZeroSet Set button
The center of measurement ischanged to light spot position

Zero reset

Equivalent processing to that of
ZeroSet ReSet button
The center of measurement ischanged to center of screen

OutputduringOutput only during measurement
measurement
Output while NG result is
displayed
Synchronized with NG display on
NG output(continued even while the the screen
measurement is stopped)

COM

Output common

SYNC

Externalsynchronous signal External sampling signal
input

GND

Internal GND

High-speed input* The operation of I/O input (IN1 to IN5) is executed only in remote status.

59G-008-0011

2) When the mode 2 is selected
Signal
name

IN1

IN2
IN3

IN4

IN5

OUT1

OUT2

Content of signal

Description

Remark (execution condition)

Duringmeasurement>>
switched to measurement stop
Measurement start /screenstop
During stop >> switched tomeasurement start screen
Switched to measurement stop
Measurement stop
screen1 measurement result is output
Data output
for one input
Equivalent processing to that of
ZeroSet Set button
Zero set
The center of measurement ischanged to light spot position

Zero reset

Executed
only
duringmeasurement
Executed during measurement orwhile the measurement is stopped
If it is set to ON, the screen shifts
to zero set screen
If it is set to OFF, zero set
processing is carried out
Executed
only
while
the
Equivalent processing to that of measurement is stopped
ZeroSet ReSet button
If it is set to ON, the screen shifts
The center of measurement is to zero set screenchanged to center of screen
If it is set to OFF, zero reset
processing is carried out

OutputduringOutput only during measurement
measurement
Output while NG result is
displayed
Synchronized with NG display on
NG output(continued
while
the the screen
measurement is stopped too)COM

Output common

SYNC

Externalsynchronous signal External sampling signal
input

GND

Internal GND

High-speed input* The operation of I/O input (IN1 to IN5) is executed only in remote status.

60

G-008-0011- Control I/O operation timing chart (standard measurement mode)

Measurement
statusMeasurement is
stoppedDuring measurement

Angle

*1

Measurement is
stopped

*1

NG
⑥②/⑤G
judgment
value

⑥②
Time
Power
supply*2"zero set" input"zero reset" input"measurement start" input"measurement stop" input"serial output" input

Serial output

⑥②

⑤G

⑤G

⑥utput during
measurement⑤G output*1: period without detected lightContent of signal
Measurement(START)
Measurement(STOP)

If the input is set to OFF during measurement or measurement stop, the data
is output
If the input is set to ON while the measurement is stopped, the screen shifts
to zero set screen. If the input is set to OFF, zero set is fixed.
If the input is set to ON while the measurement is stopped, the screen shifts
to zero set screen. If the input is set to OFF, zero reset is fixed.

Zero set
Zero reset

NG output

Description

start If the input is set to ON while the measurement is stopped, the measurement
is started
stop
If the input is set to ON during measurement, the measurement is stopped

Data output

Outputmeasurement*2: input signal is 0.2sec or moreduringDuring measurement, the output is continued
This signal is output when the measurement result is NG.
If the measurement result is NG while the measurement is stopped, NG
output is continued even while the measurement is stopped

61

G-008-0011- SYNC input
If "EXT1" is selected for synchronous selection (Sync) in the standard measurement mode, themeasurement and the data saving are carried out in the timing synchronized with the input signal.
In the measurement mode, the motor 1-rotation signal is input in this input terminal to use it as a
trigger signal for starting the acquisition of 1-rotation data.
(Electric specifications)
Input level: TTL (0-5V)

Minimum pulse width: 500ns

Logic: falling edge

Delay time

: (250ns+50ns) or less
Minimum pulse width

SYNC inputInternal sample

Delay time

- Measurement external synchronization function
If FG output signal of motor driver IC is connected to SYNC terminal of I/O interface, the data can be
sampled in synchronization with FG signal.
(Operation timing)
When FG Num = 6
1 rotation④inimum
width

pulse

FG signal input
1at input

2nd input
6th input

Internal sample

Delay time

Delay time

62

Delay time

G-008-0011<Interface circuit>* To turn ON the input of IN1 to 5, short-circuit each input terminal to GND terminal (1-pin) with
no-voltage contact such as a switch.

63

G-008-0011

3-2 Analog output
The analog voltage proportional to measurement value can be output from BNC connector (CH1, CH2).
For the output item, X, Y, D or OFF for both of CH1 and 2 can be selected from the screen setting (referto page 46).

Analog output (⑬)

10④easurement
(deg)

value

0

-10

Measurement range(e.g.) for 0.17° type, 0.17 (deg)Relationship between measurement value and output voltage

・ In the figure shown above, X or Y output is set. The output range when D output is selected is 0V to
10V.
・ The output is output only during the measurement period ([Start]). During measurement stop, ([Stop]),the output is held.
・ If "Zeroset" is set, the present output voltage is set to 0V.

64

G-008-0011

3-3 Serial interface
3-3-1 Specifications
Specifications / complying with EIA and RS-232C
Communication method: start-stop system

Transmission code

: ASCII

Data bit length: 8bitStop bit length: 1bitParity check: noneBaud rate: 9600, 19200 bit/sec selected

Flow control: noneConnector pin numberPinnumber
1
2
3
4
5
6
7
8
9

Signal
name
NC
RXD
TXD
DTR
GND
NC
RTS
NC
NC

RemarkReceived data
Sent data
Always ON

Always ON* For the connection with PC, use DSub9-pin (female-female) cross cable.

65

G-008-0011

3-3-2 Functions
1) Measurement data output (data is output once per measurement)
If it is set to ON in the serial output (Seri-Out) screen, the measurement data is output immediately after
the measurement.
a) Standard measurement mode
R A ,

,

,

,

,

,

,

,

,

,

,

,

C L
R F

Content of data
No.

Name of item

Description

Number ofcharacters

Judgment result

OK >> ONG >> NERROR (result incomplete) >> E
All judgment settings are set to OFF >> *1

Data number

Data number set on the data screen(or automatic increment value)

8

Present value X

During measurement, present X value (when the measurement
is terminated, X value while the measurement is stopped)

8

Present value Y

During measurement, present Y value (when the measurement
is terminated, Y value while the measurement is stopped)

8

Present value D

During measurement, present D value when the measurement
is terminated, D value while the measurement is stopped)

8

Maximum X value

Maximum value of X

8

Minimum X value

Minimum value of X

8

X width

Width of X (｜maximum X value - minimum X value｜)

8

Maximum Y value

Maximum value of Y

8

Minimum Y value

Minimum value of Y

8

Y width

Width of Y (｜maximum Y value - minimum Y value｜)

8

Maximum D value

Maximum D value

866

G-008-0011b) Motor measurement mode
R A ,

,

,

,

,

,

,

,

,

,

,

,

,

,

,

,

,

C L
R F

Content of data
No.

Name of item

Description

Number ofcharacters

Judgment result

OK >> ONG >> NERROR (result incomplete) >> E
All judgment settings are set to OFF >> *1

Rotation frequency

Rotation frequency of motor

5

Number of samples
Number of data samples that are obtained per rotation
per rotation

4

Numberof
Number of laps to be measured
measurement cycles

4

FG pulse countNumber of index triggers

4

Data number

Data number set on the data screen(or automatic increment value)

8

Maximum X value

Maximum value of X

8

Minimum X value

Minimum value of X

8

Maximum Y value

Maximum value of Y

8

Minimum Y value

Minimum value of Y

8

Axial runout X value

Axis fallen (X value at gravity center)8

Axial runout Y value

Axis fallen (Y value at gravity center)8

Axial runout distance Axis fallen (D value at gravity center)

8

Outermost
value

point

X

Outermost point (X value)

8

Outermost
value

point

Y

Outermost point (Y value)

8

Axis fallen (D value at gravity center)8

Maximum amplitude

8

Outermost
distance
Amplitude

point

67

G-008-0011

c) Polygon mirror measurement mode
R A ,

,

,

,

,

,

,

,

,

,

,

,

,

* 1set (

to

,

,

C L
R F
) is repeated for the number of faces.
,,,

Content of data
No.

Name of item

Description

Number ofcharacters

Judgment result

OK >> ONG >> NERROR (result incomplete) >> E
All judgment settings are set to OFF >> *1

Rotation frequency

Rotation frequency setting value

5

Number of faces

Face count setting value

2

Numbermeasurementsof Sampling data count (calculating formula: number of faces x
lap)

4

Rotating direction

Rotating direction (CW/CCW)

3

Data number

Number set on DataNo screen(or automatic increment value)

8

Maximum value

Maximum value of sampling data Y value

8

Minimum value

Minimum value of sampling data Y value

8

General face tangle

Width of sampling data(calculating formula: ｜maximum value - minimum value｜)8

Faceaverage
Maximum value of average face value
maximum value

8

Face
average
Minimum value of average face value
minimum value

8

Width of average face value
Face average face(calculating formula: ｜maximum value of average face value tangle
minimum value of average face value｜)

8

Maximum proximal Maximum value of proximal face difference
face difference value (calculating formula: MAX ｜proximal face difference｜)

8

Average face value

8

Average value for each face (average face value)

Maximum face value Maximum value for each face

8

Minimum face value Minimum value for each face

8

Proximaldifferenceface

Proximity difference depending on average face value(calculating formula: ｜average face value (N) - average facevalue (N+1)｜)

Standard deviation ofStandard deviation of sampling data Y value for each face
face

68

8

8

G-008-0011

2) Remote control
If a communication command is sent from host equipment, readout of judgment result, setting content,change of setting content, and zero set etc. can be carried out.
(These operations can be carried out only in remote status when Remote button on the main
screen is pressed.
To reset the remote status, press Esc button long (for four seconds or more) or send the remotereset command.)* For details, refer to the exhibit, "Communication Interface Instruction Manual".

69

G-008-0011

4. Other
4-1 List of error displays
If an error or warning is generated at measurement or setting, the code is displayed.
The content of main errors and warnings is displayed. Check the content and take measures.
Status

Error

Code

Message

Description

E1

Level Low

Received light level reduction error

E2

Level Over

Received light level excess error

E3

Area Out

Light spot area out error

E5

Input Error

Input value range out error

E6

10 Item Over

10 display items or more selection error

E7

500KHz Over

Sample frequency excess error (MAX500)

E8Data Over

Obtained data count excess error

E9

PW Set Error

LD power automatic adjustment error

W2

Level Over

Received light level excess

W4

Level Over

Received light amount edge saturation

Warning70

G-008-0011

4-2 Troubleshooting
Symptom

Cause

MeasureReferential
page

The power supply is The
power
not turned ON
disconnected

cord

is Insert it in an outlet securely

The light spot pointer is The connection cable is Connect the cable properly when the
not displayed on the disconnected
power supply of the controller is turned
monitorOFF
The distance to object to be Set the distance to object to be measured
measured is too longto 230±30mm or less
An object with larger Measure the angular displacement within
angular displacement than the measurement range (±0.17°, ±0.5°,
measurement range is ±0.9°)
measured
The laser output is low
Adjust the laser output with the setting
menu LD POWER
Lifetime of laser

If the laser output fluctuates heavily or the
output does not increase after setting LD
POWER, please contact our company
The
measurement The reflection rate of an An object to be measured of HRAD isresult is unstableobject to be measured is specular object
low
The laser output is low
Adjust the laser output with the setting
menu LD POWER
There is vibration

There is ambient light

Check reflection rate and laser output areproper and eliminate the cause ofvibration
Eliminate the ambient light around HRAD
head

There is no reaction to IN1 to 5 and GND are not Connect IN1 to 5 and GND properly
I/O input
connected properly

P. 7 to 16

-

P. 32
-

-

P. 32
-

P. 59

The system is not in remote Press Remote button from main menu
statusand set the system to remote status

P. 58

I/O output is not carried OUT1, 2 and output Connect OUT1, 2 and output common
outcommon are not connected properly
properly
There is no reaction to The serial cable is not Connect the serial (cross) cable properlycommandconnected properly

P. 59

The
baud
mismatchedrate

is Set the baud rate properly

The system is not in remote Press Remote button from main menu
statusand set the system to remote status

71

P. 7
P. 52
P. 58

G-008-0011

4-3 System specifications③0.17 degree (±10 minutes 12 seconds)③0.5 degree (±30 minutes 00 second)③0.9 degree (±54 minutes 00 second)
230±30mm (0.17)
Measurement distance
150±30mm (0.5, 0.9)
③0.4 (0.17)
Resolution③1.0 (0.5)③1.8 (0.9)
Measurement range

Sampling speed

250/500k sample/second

Light source

Semiconductor laser (wavelength 658nm)

Outgoing beam output 5.0mW or less (Typ2.5mW class 3R)
Laser beam diameterΦ1.0mm or less (at beam window)

Display and setting part 5.7-inch TFT color liquid crystal display with touch panelStandard measurement mode:
X, Y, D, MAX_X, _Y, MIN_X, _Y, WIDTH_X, _Y
Motor measurement mode:
X, Y, D, MAX_X, _Y, MIN_X, _Y, WIDTH_X, _Y
Center of gravity: AXTL_X, Y
Outermost point: FMST_X, Y
Amplitude: WIDTH
Measurement item
Polygon mirror measurement mode:
X, Y, D, MAX_X, _Y, MIN_X, _Y, WIDTH_X, _Y
General: MAX, MIN, P-P
Face tangle: MAX, MIN, W P-P
Proximity: PROXIMAL, data of each face (AVE, MAX, MIN, tangle error
difference)
Relative origin, tolerance (upper and lower limits), unit switching (degree, minutesecond), setting value saving / reading
Function
Measurement data serial output, adjustment of amount of outgoing beam
Analog output

2CH: selected from X (③10V), Y (±10V), D (10V)
Output impedance: 300Ω, offset ±20mV or less

External synchronous
1CH (TTL level)
signal input
Photocoupler insulation input (5CH),
External control I/OOpen collector output (2CH, 1CH is OK/NG output)
Serial I/F
RS-232C (measurement data I/O)
Power supply (power
AC100 - 240V③10% 50/60Hz (15w)
consumption)72

G-008-0011

5. Appendix
5-1 Data collection sample programThis program is a macro of Excel that obtains the measurement of controller through serial communications.
PC requires the operating environment for Microsoft® Excel.

5-1-1 Description of operation
Connect the controller and the PC with DSub9-pin (female-female).
Execute "HRADterm.xls".
The work sheets are separated for each measurement mode (Standard, Motor, Polygon 1, 2). Select a sheet
depending on the application of measurement.

(e.g.) Work sheet for Standard mode

No.

Name

Description

COM Port

Serial communication port number (COM1-8)

Baudrate

Set the communication baud rate (9600/19200) according to controller

Start button

The measurement is started

Stop button

The measurement is stopped

Read button

RA command is sent and 1 data of final measurement result is received

Read All button

RZ command is sent and max. 100 past data are received

Clear

The cell data on the screen is cleared

Sheet tab

The sheet of each measurement mode is selected73

G-008-0011

5-2 Screen image data acquisition programThis program can import the measurement screen image of the controller in PC to display it and save the image
data as a file in BMP format. It can also read out the saved image data.

5-2-1 Startup
Before obtaining a screen, connect the controller and the PC with a serial cable.
Execute "Capture.exe" (the figure below shows the screen after an image is received).

5-2-2 Description and operation
Screen acquisition button
Be sure to set the screen of the controller to the status after the measurement is terminated, and then press theimage acquisition button. In other screen, an execution error is generated. If the image data is transferred properly,
the hard copy of controller screen is displayed on the PC in approximately six seconds after the start (an image on
the graph screen can be also obtained).
File save button
An obtained image can be saved in BMP file format.
File read button
A saved image in BMP file format can be read.
COM port
Select a serial communication port number (COM1 to 9) of PC.
Communication speed
Select the communication speed with the controller.
Select 19200bps or 9600bps and adjust it to the value of the controller.
Quit button
This software is quitted.

74G-008-0011

5-3 Procedure for updating the firmware
Check the power supply is turned OFF and remove the cover on the rear surface of the controller.
Cover

Rear surface of controller
Tilt the yellow pin in the back to the right side seen from the rear surface of the controller (photo shown below).

To right

75

G-008-0011

Connect the PC and the controller with RS-232C cross cable and turn ON the power supply of the controller.
Activate the rewriting software (HD_******.exe) of software to be upgraded displayed on PC.
e.g.:

After activating it, check the version to be rewritten and select the COM port of PC that is connected with thecontroller.

Version inforamtion

Select COM port

START button

Press START button on the screen.
The rewriting of upgrade software is started.
* During the rewriting, do not turn OFF the power supply of the controller.
If an error message is displayed, check the following.
a) Is the COM port selected by rewriting software correct?
b) Isn't the COM port selected by rewriting software opened by other software?
c) Are the controller and the PC connected with RS-232C cross cable?
d) Doesn't the connected cable cause breaking?

76

G-008-0011

If the message shown in the figure below is displayed, the rewriting is terminated successfully.
Press QUIT button to quit the rewriting software.

Turn OFF the power supply of the controller once, and then reset the yellow pin you tilted in stepside).
* If you forget to reset it, nothing is displayed on the screen even if the power supply is turned ON.

To left

Reset the removed cover on the rear surface. The upgrade is completed.

77(tilt it to left

G-008-0011

6. Guarantee and after-the-sale service● Guarantee
When you contact our company, please inform us of serial number on the side surface of your product.
The guarantee period is one year after the delivery.
However, the following cases are excluded from the guarantee target. The product will be repaired with extra
charge.
- A failure or damage is caused by wrong usage, modification or repair that is not carried out by ourcompany's staff- A failure or damage caused by improper handling such as falling during transportation or movement- A failure or damage caused by fire, salt damage, gas damage, abnormal voltage, natural disaster such as
earthquake, thunder, wind and flood damage- A failure or damage caused by handling that goes against usage or precautions shown in the manual● After-the-sale service
Before requesting the repair, please check the items shown in page 71.
If you have any inquiries, please contact the sales group, OST business division of or company.
<During guarantee period>
If a failure is caused in usual use status following precautions shown in the user's manual, the product will be
repaired without charge.
For a failure out of guarantee range shown above, the product will be repaired with extra charge.
<After the guarantee period>
If the functions can be maintained by repair, we will repair the product as requested.

● Repair service period
The minimum holding period of this product's performance components for repair (parts requierd for maintaining
the functions) is one year after the manufacturing is discontinued. This period is set as repair service period.
Even after the component holding period, the product may be repaired. Please contact the sales group, OSTbusiness division of or company.

* For a failure generated in this product, our company does
not accept any responsibility other than repair withoutcharge based on this guarantee.

78

G-008-0011

For More Information Call to us:

SURUGA SEIKI CO., LTD.
Overseas Section, OST Division
TEL : +81-3-6711-5014
FAX : +81-3-6711-5021
URL : http://www.suruga-ost.com/
E-mail : e-ost@suruga-g.co.jp

79