Optical Sensor

Configuration of The Common Accessory
This is the common accessory for laser autocollimator.

"OHMF
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Tilt stage

Electrical power・Conector・Cable

LCD monitor

Optical sensor head-BTFS
BVUPDPMMJNBUPS

Monitorbracket

Stand
Rod bracket

Mirro・Wedge

Paul
Standbase

Tilt Stage
This is good for controllingof light axis tilt.
This is useful for 2-axis tilt adjustment
and lock mechanism.

HB10)JHITQFFE٬)JHISFTPMVUJPO4UBOEBSE"DDFTTPSJFT

Model
Load capacity
Tilt angle
Material - finished
Weight

H410
H900
H920
HA10
HA10LHA11N
Compatible stand HA12S
HA12
HA12L
HA14
HB10-RB20
HB10-RB38
Compatible rodbracket
HB12-RB20
HB12-RB38

Compatible
optical sensor

5019

HB11

HB12

SPEC2-axis small-sized tilt stage 2-axis middle-sized tilt stage 2-axis big-sized tilt stage
HB10
HB11
HB121kgf
2kgf5kgf
2 dgrees
2 dgrees
5 dgrees
Aluminum-Almite finish, Stainless
0.2kg
0.4kg
0.5kg
Ӱ×

Ӱ×

Ӱ×

ӰӰ
Ӱ

××

Ӱ×

Ӱ×

ӰӰ×

Ӱ×

Ӱ××

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Stand"OHMF
NFBTVSFNFOUCan be installed any optical sensors.
It consists of stand base, pole and rod bracket.

HA10Paul

HA11N

HA12

Rod bracket-BTFS
BVUPDPMMJNBUPSStandbase

HA10L

HA12S

HA12L

SPEC
Model
WeightCompatible tilt
stage

HB10
HB11
HB12

HA102.4kg

HA10L
3.0kg

HA11N
9.2kg

ӰӰ×

ӰӰӰ

Ӱ
Ӱ
×

HA12S
9.2kg

HA1211.4kg

HA12L
19.1kg

HA142.2kg

××Ӱջ××

ӖConfigurationPaul

4UBOE base

Model
Diameter
LengthMaterial
Model
Size
Material - finishedRod bracket

Model

A42-400Į20g6
L=400mm
HA10-BASE
W200×D250HA11-P38L355
Į38g6
L=355mm
Stainless
HA11N-BASE
W200×D250

HA10L-BASE
W200×D350

Aluminum-Almite finish
HB10-RB20

HA12-P38L600
Į38g6
L=600mm
HA12L-BASE
W280×D412

HB10-RB38

HA14L-BASE
Aluminum-Almite
finishS45C electroless nickel plating

HB10-RB20WithplateA42-300Į20g6
L=300mm

HB12-RB38

HB10-RB20)JHITQFFE٬)JHISFTPMVUJPO4UBOEBSE

Rod Bracket"DDFTTPSJFT

The rod bracket for installation tilt stage to the pole. There are two kinds of radius Į20 and Į38. Also available 2kinds of tilt stages for
HB10 and HB12.(A rod bracket is included in a stand)

HB10-RB20

Model
Material - finished
WeightCompatible pole diameter
HB10Compatible tilt
HB11stage
HB12

HB10-RB38

HB12-RB20

HB12-RB38SPEC
Į38 Rod bracket
Į20 Rod bracket
HB10-RB38
HB12-RB20
Aluminum-Almite finish, Resin
0.2kg
0.2kg

Į20 Rod bracket
HB10-RB200.1kg
Į20g6Į38g6
ӰӰ×

Į38 Rod bracket
HB12-RB38
0.3kg

Į20g6Į38g6
××Ӱ5020

Optical Sensor

MirrorFor setting an optical sensor in vertically on the reference face.

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SPECParallel mirror
HS-0
BK7Į300/−0.1mm
10±0.1mm
Less than 5 seconds
Duplex reflective wavefront ģ/10
Center over Į27mm circle
Dielectric multilayer film
Ġ0°
R650±20nm͡99
Center over Į28mm circle

ModelMaterial
External dimension
Thickness
Parallelization
Surface accuracy
Polishing effective diameter
film forming specification
Incident angle
RefrectanceFilm effective diameter-BTFS
BVUPDPMMJNBUPS

Wedge Substrate/Wedge Mirror
Wedge substrate and Wedge mirror with micro angle.

Wedge substrate)JHITQFFE٬)JHISFTPMVUJPOMaterial
External dimension
Thickness
Wedge tolerance
Surface accuracy
Surface accuracy
measurement wave
lengthPolishing effective
diameterFilm forming
specificationAngle
1 degree
0.5 degrees
0.25 degrees
0.2 degrees
0.1 degrees

4UBOEBSE"DDFTTPSJFT

SPEC
Wedge substrate
BK740±0.1×40±0.1mm
10mm±10 seconds
Duplex reflective wavefront ģ/4

Wedge mirror
BK740±0.1×40±0.1mm
10mm±10 seconds
Duplex reflective wavefront ģ/4

ģ=632.8nm

ģ=632.8nm

Center over Į36mm circle

Center over Į36mm circle

N/AALMgF2Wedge substrate
Model
HS-100HS-050HS-025HS-020HS-010Wedge mirror
Model
HS-100AL
HS-050AL
HS-025AL
HS-020AL
HS-010AL

Wedge millor

5021

քParallel mirrorօքWedge substrateօքWedge mirrorօ

Set it so that an optical axis becomes
vertical to a datum level.

Use for processing unit calibration. When you use the wedge board,please use a parallel mirror in the top.

Use for processing unit calibration. You don't
need to put the parallel mirror on it.

Beam Split٬90 Degree Folded Adaptor"OHMF
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90 degree folded adaptor

3 beam split adaptor
Folded 90 degree optical axis ofautocollimator

Product name90 degree folded adaptor
2 beam split adaptor
3 beam split adaptor

Model
HT-90
HT-20
HT-30

Weight0.04kg0.24kg0.25kgMulti spot measurement isavailable with splitting an
optical axis 2 or 3.

-BTFS
BVUPDPMMJNBUPS

RemarkFolded 90 degree optical axis of autocollimator. ˥ 1 ˥ 3
Split two the autocollimator beam ˥ 2 ˥ 3
Split three the autocollimator beam ˥ 2 ˥ 3

˥1 Adaptor plate is needed to mount Sensor Head (H410-HTP).
˥2 Beam Spacing Min14mm, Max 55.5mm.
˥3 Each beam power may change by adaptor mounting condition.
【Split adaptor application guide】
Ex1: Simple inspection of a planar mirror

Ex2: Optical disc drive assembly)JHITQFFE٬)JHISFTPMVUJPO4UBOEBSE"DDFTTPSJFT

5022