Doc. No. SG21-305-001E

Smart W-LAC
H920-P500

SURUGA SEIKI CO., LTD.

1

Doc. No. SG21-305-001E

Introduction
Thank you for purchasing a Suruga Seiki product.
In order to use the products correctly, read this User's Manual before use.
After reading, store the manual in a safe place close at hand where it can be consulted at any time.
Caution- The content of this manual may change without notice due to improvements in performance and function.
- The content displayed on the actual screen may differ from the screen display content indicated by the
manual.
- Contact Suruga Seiki Optical System Division sales personnel with any questions or inquiries.
Revision history
Edition

Date

Revision history

1st Edition

2020/07/21

New

2nd
Edition2020/09/04

P.10: Product name corrected from H3810 to H920
P.13: Tilt LD Monitor added
P.19: Analog output signal band added
P.18: Repeatability corrected from 0.18 sec to 20 sec
Linearity corrected from +/- 0.2% F.S. (= +/- 12.96 sec) to +/- 0.25% F.S. (= +/90 sec)
P.19: W177 x H141 x D51.5 mm corrected to W202 x H141 x D50.5 mm
P.44: Analog output user side connection recommendation diagram partially corrected

3rd
Edition2021/8/31

P.7: Laser label explanation page added
P.17: Cable connection diagram error corrected
P. 57: W003 command explanation error corrected
P. 63: W2, W4 warning number explanation error corrected2

Doc. No. SG21-305-001E
Contents
Before using the product, confirm that the following parts are included.

Product configuration■ Model: H920-P500(1) Sensor head H920-P500M 1 pc
+LD connector XW4B-06C1-H1 1 pc
(2) Signal processor HSP-3810 1 pc
+ DC Power In (terminal block) XW4B-02C1-H1 1 pc
+ Analog connector XW4B-07B1-H1 3 pcs+ I/O connector IN XW4B-10B1-H1 1 pc
+ I/O connector OUT XW4B-05B1-H1 1 pc
(3) Sensor head cable H900-CABLE1 1 pc

3Doc. No. SG21-305-001E

Using the Product Safely
Before use, be sure to read the following Safety Cautions.

!

indicates prohibition.

CautionBe sure to observe the Safety Cautions indicated here. Otherwise, injury or damage may result.

- Cautions on Safety and Usage

The product should be installed and operated by someone familiar with laser device safety.



In a noisy environment, use a power strip with a noise filter.

Be sure to ground the controller. If not grounded, electric shock may result.

- WiringWhen connecting or removing cables, turn off the power sources for the main unit and the equipment
connected to the main unit. If the power source remains on, the main unit may be damaged.

When connecting external equipment control cables, check the external equipment polarity. If the polarity
is incorrect, the external equipment may be damaged.

- Operating Environment
The product must not be installed in locations with the following characteristics.


Dust



Significant temperature changes



Vibration

Tilts causing instabilityExposure to corrosive or inflammable gases

4Doc. No. SG21-305-001E!

Caution- Handling and Storage
When placing the product in long-term storage, remove the 24 V power source connector.
This will provide protection from accidents such as fire or electric shock.
- Power Source
Prepare a 24 V DC power source.

- Disassembly and Modification
Do not disassemble, modify, or unsuitably repair the measuring head orcontroller chassis.
Contact Suruga Seiki Optical System Division sales personnel in the case ofany malfunctions.

- Repair Requests
In the following situations, immediately cease use and request repair via Suruga Seiki Optical
System Division sales personnel.
Continued use may lead to fire, electric shock, or injury.
・ Abnormal noise, abnormal smell, or smoke
・ Damage to cables
・ Product exposed to water or to ingress of foreign objects
・ Product dropped or product cabinet damaged

For inquiries, see page 68.

5Doc. No. SG21-305-001E!

Safety Cautions for the Laser

This is a warning for anyone handling the laser or exposed to potential danger nearby. Be sure to follow thedirections here.

Caution: Control, adjustment, or execution using methods not listed
in this manual may result in hazardous laser irradiation.

・ Never look directly or through optical methods at the laser light. If the laser makes direct contact with eyes,
it may cause serious damage. Damage may result not only from the direct laser light but also from its reflected
light.
・ Be sure to apply the safety/preventative measures required of the users of Class 3R laser products by thelaws and regulations of countries and regions where this product is used.
・ In order to avoid radiation exposure due to careless reflection from laser irradiation target objects or theirsurroundings, install a protective enclosure around the laser irradiation range, using materials with adequate
reflectivity, durability, and heat resistance.
・ When the enclosure includes a door, we recommend the construction of an interlock system functioning to
cut off laser irradiation when the door is opened.
・ Do not leave the laser in the irradiating state.
・ Only those expert in laser devices should be permitted to handle the laser. Never permit those without
experience or training to assemble, operate, or repair the laser equipment.
・ Securely position and fix a DUT mirror so as to prevent unintended mirror reflection or diffuse reflection.
・ Do not allow the laser beam to strike reflective objects. Scattered laser light from the reflective surface is as
harmful as the laser beam itself. Dangerous reflective objects may include rings, watchbands, metal pens or
pencils, etc.
・ Assemble the head so that the laser beam is not at eye level.
・ Terminate the laser beam light path with an adequate non-reflective beam stopper.
・ When laser radiation is expected, be sure to wear laser protective glasses of optical density 3+ (@650 to665 nm).
・ Do not perform operation or maintenance not listed in this manual. Radiation exposure due to laser light orelectric shock may result.

Laser Warning Labels
The content of the warning labels on this product and their locations on the product are indicated below.

6Doc. No. SG21-305-001E

レーザ光
LASER RADIATIONAVOID EXPOSURE・ LASERRADIATION IS EMITTEDFROM THIS APERTURE

目への直接被ばくを避けること

AVOID DIRECT EYE EXPOSURE
Max.power:5mW
Medium:semiconductor

Pulse width:CW
Wabelength:658nm

CLASS 3R LASER PRODUCTIEC 60825-1 Edition 3.0(2014)

Class 3R Emission

This product complies with 21 CFR Chapter I, Subchapter J.
Complies with FDA performance standards for laser products
except for conformance with IEC 60825-1 Ed. 3., as
described in Laser Notice No. 56, dated May 8, 2019.

SURUGA SEIKI CO.,LTD.

505,Nanatsushinya,Shimizu-ku,
Shizuoka-shi,Shizuoka,424-8566,JAPAN
Serial No.
Manufactured date
MODEL︓H920-P500

00001234567-01
202010MADE IN JAPANレーザ光
LASER RADIATION
目への直接被ばくを避けること

AVOID DIRECT EYE EXPOSURE
Max.po wer:5mW
Med ium:semico nd ucto r

Pu lse width:CW
Wab elength:658nm

CLASS 3R LASER PRODUCTIEC 60825-1 Edition 3.0(2014)

AVOID EXPOSURE・ LASERRADIATION IS EMITTEDFROM THIS APERTURE

Class 3R Emission

7Doc. No. SG21-305-001E
INDEX

Inroduction..............................................................................................................................................2
Caution .....................................................................................................................................................2
Revision history ........................................................................................................................................2
Contents ..................................................................................................................................................3
Using the Product Safely .......................................................................................................................4. System Configuration ........................................................................................................................10
1.1 H920-P500 system configuration diagram ............................................................................................ 10
1. 2 H920-P500 product configuration ......................................................................................................... 10
2. Part Names and Functions .............................................................................................................. 11
2.1.1 H920-P500 sensor head (appearance) ............................................................................................... 11
2.1.2 H920-P500 sensor head (rear panel surface) .................................................................................... 13
2.2 Implemented laser information ............................................................................................................. 14
2.2.1 Example of laser interlock system configuration ........................................................................15
2.3 H920-P500 processor (part names and functions) ............................................................................... 16
2.4 H920-P500 cable connection diagram ................................................................................................. 17
2.5 System performance ............................................................................................................................. 18
2.6 Product installation method .................................................................................................................. 20
3.Measurment Procedure..................................................................................................................... 22
3.1. Seting and measurment process ......................................................................................................... 22
3.2. Basic operation .................................................................................................................................... 23
3.2.1. Startup screen ....................................................................................................................... 23
3.2.2. Initial screen (after power source on) ....................................................................................24
3.2.3. Measurement screen.............................................................................................................25
3.3.1. Menu configuration ................................................................................................................28
3.3.2 Scren configuration） .............................................................................................................30
3.4.Other ...................................................................................................................................................... 39
3.4.1. Setting remote mode .............................................................................................................39
3.4.2. Cancelling remote mode .......................................................................................................39
4. Connecting External Devices ..........................................................................................................40
4.1 I/Ointerface (H920-P500) ....................................................................................................................... 40
4.2.1. Analog interface.....................................................................................................................43
4.2.2. Relations between measurement values and output voltage .....................................................45
4.3. Serial interface ...................................................................................................................................... 46
4-3-1 Specifications .........................................................................................................................46
4.3.2. Control command list.............................................................................................................47
4.3.3. Control command format .......................................................................................................48(1) File reading（R000） ................................................................................................................48(2) File information readout（R001）..............................................................................................49(3) Setting value readout（R002） .................................................................................................50(4) Moving average point count readout（R005） ..........................................................................51(5) Analog polarity reversion setting readout（R006） ...................................................................52(6) Measurment value readout（R009）.........................................................................................53(7) LDmonitor readout（R010） .....................................................................................................54(8) Fila saving（W000） .................................................................................................................54(9) File information setting（W001） ..............................................................................................55(10) Setting value setting（W002） ................................................................................................56(11) Setting value batch setting（W003） .......................................................................................57(12) Moving vergae point count setting（W005） ...........................................................................58(13) Analog polarity revision setting（W006） ................................................................................59(14) Measurment stop（S000） ......................................................................................................60(15) Measurement start（S001） ...................................................................................................60(16) Remote cancel（S002） .........................................................................................................60(17) Remote request（S003） ........................................................................................................61(18) LD output automatic adjustment（S005） ...............................................................................61
4.5. remote control ....................................................................................................................................... 628

Doc. No. SG21-305-001E
5. Other ..................................................................................................................................................63
5.1. Error display list .................................................................................................................................... 63
5.2. Troubleshooting ........................................................................................................................64
5.3 Product external appearance................................................................................................................. 65
5.3.1 H920-P500 sensor head external appearance .......................................................................65
5.3.2 H920-P500 processor external appearance ...........................................................................66
6. Warranty and after sales service .....................................................................................................679

Doc. No. SG21-305-001E. System configuration
1.1 H920-P500 system configuration diagram （H920-P500 系统构成图）The system configuration is composed of the sensor head, one signal processor (tilt), and the sensor
head cable. （系统包括 Sensor Head 和一个 Signal Processor(Tilt)以及电线(Sensor Head Cable)）

Start
Setup

Analog out

Analog out

H920-P500◎

View
RemoteTx: 2’33
Ty: -1’19◎◎

When installing user interface devices such as a processor or user PC, becareful to avoid laser exposure during normal operation and maintenance.
（当配置处理器和用户 PC 的用户界面部分时，请注意不要在暴露在激光下的情况下进
行操作和维护）1.2 H920-P500 product configuration （产品构成）The part names and models used in the above configuration are shown here. （上述构成部品的型号说
明）#Part name

Model

Quantity1

Sensor Head

H920-P500M

1 pc

2

Signal Processor

HSP-3810

1 pc

3

Sensor Head Cable

H900-Cable1

1 pc

10

Doc. No. SG21-305-001E

2. Part Names and Functions
2.1.1 H920-P500 sensor head (appearance)

#3

#2

#1

Fig. 2-1-1. External appearance (front side)

No.

Name

#1

Tilt

Detailed description
measurement

beam

emission

aperture

#2

#3

Tilt

measurement

This is the tilt measurement beam emission aperture.
Caution: Do not look into it or touch it with bare hands.

beam

entrance

This is the tilt measurement beam entrance aperture.

aperture

Caution: Do not touch it with bare hands.

Sensor head fixing hole

The sensor head fixing hole uses three included cap bolts (M5 x 12).
Tightening torque 460 cN・m

#4

Laser seal

Emission position display

Caution: Before connecting or removing cables, be sure to turn the controller power source off.

11

Doc. No. SG21-305-001E

Fig. 2-1-2. External appearance (rear panel surface)12Doc. No. SG21-305-001E

2.1.2 H920-P500 sensor head (rear panel surface) （传感器头（后面板））

B
A

Fig. 2-1-3. External appearance (rear panel)

SymbolA

Name

Detailed description

I/F Connector

Connects to the processor with liquid crystal monitor.
SignalInterlock+Interlock for laser safety

InterlockB

LD connector

Function

Tilt LD Monitor+
Tilt LD Monitor-

Tilt-LD current monitor

Applicable connectors: XW4B-06C1-H1 (made by Omron)<<Tilt LD Monitor diaglam>>Sensor Head

Tilt LD
Drive Block(～5mW)
Tilt LD
Drive Current
Monitor Block

Tilt LD Current Monitor(+)

Output Inpedance≒1KΩ

LD Current
(mA)
200
100

Tilt,LD
Current Monitor
Scaling Coefficient=100mA/V ±5%

Tilt LD Current Monitor(-)
GND

0
1
2
LD Current Monitor Voltage(V)13Doc. No. SG21-305-001E

2.2 Implemented laser information
An overview of the laser system parameters is below. Confirm the regulations concerningclasses governed by the Center for Devices and Radiological Health (CDRH), a department of
the Food and Drug Administration (FDA).
(1) Main laser beamMedium Semiconductor laser
Optical Power :5 mW max.
30 mW max.
Wavelength :658nm
Duration :CW
Beam divergence: Parallel beams
Beam Diameter :1.0mm
Embedded Laser :HL6501MG (OCLARO)

14

Doc. No. SG21-305-001E
2.2.1 Example of laser interlock system configuration
When using this product, in order to prevent radiation exposure due to reflections from the mirror or
surrounding objects, construct an interlock system along with a protective enclosure around the laser
irradiation range. Below is an example of the laser interlock system configuration.
To stop the laser radiation electrically, the interlock connector is used as in the figure below. Two terminals
are assigned for interlock control and laser irradiation is enabled by connecting them, so that it will be
stopped electrically upon disconnection.
Therefore, by connecting the access door opening switch to these terminals, interlock control is enabled.

W-LAC

Fig. 2-2-2. Laser interlock

15Doc. No. SG21-305-001E

2.3 H920-P500 processor (part names and functions)Fig. 2-3-1. Processor external appearance

SymbolNameA

LCD Display (with touch panel)

Details
Used for operation and display via touch panel display.
The output is analog.
SignalAnalog ch1+

Measurement Result Signal output*

Analog ch1-

- Analog output +/-10V

Analog ch2+
B

Reserved

D

Reserved- Output impedance：50Ω
- Offset：+/-5mV or lessAnalog output (Tilt)

C

Function

Analog ch2-

- Gain : +/-0.05%

AGND

Analog GND
High Speed output (5VTTL Level)

HSOUT*Measurement error status digital output*L=Analog valid / H=Analog invalid

DGND

Digital GND*Analog singal recommendation: Differential signaling
Universal I/O.
SignalE

I/O terminal block(Input)F

I/O terminal block(output)

Function

IN1

Measurement Start

IN2

Measurement Stop

IN3

Data request

IN4

－

IN5

－

IN6

－

IN7

－

IN8-

－

HSIN

Not assign

DGND

Digital GND

OUT1Status(Busy)OUT2

GO/NG_Tilt

OUT3

GO/NG_Height

OUT4

GO/NG_Pos

DGND

Digital GND*IN1 to HSIN: 5 V TTL level, OUT1 to 4: open collector (rated voltage = 30 V)
G

Head I/F connector

Connects to the sensor head.

H

Serial port (RS-232C)

Connects to the PC via cross cable with a D-sub 9-pin connector.

I

Frame Ground

Perform grounding.

J

DC Power In (Terminal Block)Connector for DC power source (+24 VDC +/-10%)16

Doc. No. SG21-305-001E

2.4 H920-P500 cable connection diagram

Sensor head cable/length：2.0m

Sensor HeadLD connector
Type：XW4B-06C1-H1
Vendor：OMRON

Laser Remote
Interlock

Signal Processor

DC24V
1.2A
DC power connector
Type：XW4B-02C1-H1
Vendor：OMRON

Analog(Tx,Ty) connector
Type：XW4B-07B1-H1
Vendor：OMRONIO(Digital IN) connector
Type：XW4B-10B1-H1
Vendor：OMRONIO(Digital OUT) connector
Type：XW4B-05B1-H1
Vendor：OMRONTo Signal Processor

Fig. 2-4-1. Cable connection diagram

Laser Remote
InterlockTo Voltmeter

Fig. 2-4-2. Back panel diagram
17Doc. No. SG21-305-001E

2.5 System performance<<Measurement performance (H920-P500)>>
Function

Item

Tilt

PerformanceRange+/- 5 deg

Resolution

1 sec

Repeatability

20 sec (*1)

Linearity+/- 0.25%F.S. (= +/- 90 sec)

Sampling rate

200 kHz

+Z
+Y
+Ty
+X
+Tx

Fig. 2-5 Definition of axis direction

18

Doc. No. SG21-305-001E<<Product specifications (H920-P500)>>
Part
Sensor head

Function

Performance

Light source

Red semiconductor laser

Wavelength

Tilt

655 +/- 10 nm

Maximum output

Tilt

5 mW or below (Class 3R)

EmissionTilt

φ1.0 mm *Collimated beam diameterbeam

diameter
Precision guarantee WD

70 +/- 2 mm

Power source- (Supplied from Signal Processor)

Dimensions

W165 x H170 x D85 mm
Excluding protrusions

WeightProcessor

2.0 kgSignal output

Analog output +/-10 V(Connector Terminal blocks)
Output impedance: 50Ω
offset +/-5mV or less

Signal bandwidth

40KHz *3dB cutoff frequency

Communication port

RS-232C (D-SUB 9-pin)

Parallel I/O

Non-isolated I/O: Input 9 terminals/output 4 terminals

Power source

24 VDC +/-10%, 1.2 A

Dimensions

W202 x H141 x D50.5 mm
Excluding protrusions

CommonWeight

1.0 kgOperating environment

23 +/-3°C/20 to 80% RH
23 +/-1°C/20 to 80% RH *Recommended environment
10 to 40°C/20 to 80% RH

Storage environment

19Doc. No. SG21-305-001E

2.6 Product installation method
2.6.1 Remove the protection cover.
Remove the two cap bolts (M3 x 6) fixing the sensor head, and then remove the protection
cover.
Sensor head

Protection
cover
Cap bolt M3 x 6

Fig. 2-6 Sensor head status as of delivery
2.6.2 Sensor head installation method(1) Apply the reference plane on the base and perform positioning in the XYZ directions(2) Using the three included cap bolts (M5 x 12) or M4 screws in the 3-φ5.5 holes,
mount to a fixing base, etc.
Reference Plane

M5
fasteninghole

M4 tap hole

Reference Plane

Fig. 2-7 Sensor head reference plane20Doc. No. SG21-305-001E

2.6.2 Processor installation method (example)(1) Install an aperture on the fixing base, etc., in contact with the touch panel surface.
（reference：Aperture size 143×179）(2) Fix to the fixing base, etc. for installation with four M3 screws.
(Screws are to be prepared by the customer.)*Fix the processor for use within a range in which the included sensor head cable can be used
to connect the sensor head and the processor.

Touch panel
surfaceMounting base
aperture(reference)

Fig. 2-8 Processor installation method (example)

21

Doc. No. SG21-305-001E

3. Measurement Procedure
3.1 Setting and measurement process

Power source ON
P23

Startup screen

P24

Initial screenNo
Use present settings

P32

Yes

Setup screen
See "(5) System setting screen"

P30
LD power adjustment

Sensor head adjustment

START button

STOP button*External control is possible via I/O interface or communication commands.

(See p.40)

22

Doc. No. SG21-305-001E

3.2 Basic operation
3.2.1 Startup screen
When the processing unit power source is turned on, the following screens launch.

Now Configuration...

Wide Range LAC

SURUGA SEIKI CO., LTD.

S/W V1.00
H/W V1.00(1) Version display*(1) Version display will be displayed a few seconds after startup.

Line 1: Software version
Line 2: Hardware version

23Doc. No. SG21-305-001E

3.2.2 Initial screen (after power source on)
When configuration completes normally, the following screens will be displayed.

(1) Measurement image screen

Tilt

Start
/Stop

(2)

SetUp

(3)

Setting
View(4)Remote(5)Tx: **'**.**
Ty: **'**.**OK(6)(1) This area displays the measurement image.
(2) START/STOP buttons

See p.25(3) Setup button
Used when changing the measurement conditions setting

See p.28(4) Setting/View buttons
Used when confirming parameters within password-protected system settings.

See p.32(5) Remote button （Remote 按钮）
Used when using I/O or commands for operation.

See p.39(6) Light reception amount bar button
This is a shortcut button for the LDPW adjustment screen AutoSet button.
*This button is only enabled during measurement stop.

24

See p.30

Doc. No. SG21-305-001E
3.2.3 Measurement screen （测量画面）
During measurement, the START/STOP buttons brighten. The other buttons are displayed in gray.
(测量中[Start/Stop]按钮变亮，其他按钮均为灰色)All buttons darken during measurement stop. （测量停止时所有按钮均变暗）A. Measurement state 1 ((1): Initial screen) （测量状态（初始画面）

Start
/Stop
(5)

SetUp

(5)

Setting
View(1)

Remote
(6)

Tilt
(2)

OK

Tx: -13'52.00
Ty: 14'45.00

(3)

(4)

(1) START/STOP buttons （Start/Stop 按钮）

Start or stop measurement. （测量开始/停止）(2) Light reception amount bar (接受光强条) PSD light reception amount is displayed. （显示 PSD 接受光强）Green: Light reception amount is within appropriate range （绿色： 接收光强在正常范围内）
Red: Light reception amount is outside appropriate range （红色： 接收光强超出正常范围）(3) Judgment result Judgment result is displayed as OK or NG.
（判定结果 判定结果显示 OK 或 NG）
In the case of an error, ER is displayed. （发生异常时显示 ER）(4) Measurement value Measurement values are displayed. （测量值See p.27

显示测量值）(5) Tilt The tilt amount is displayed linearly with the origin at the center, on the X-axis for Tx and the Y-axis forTy.
（倾斜相对中心原点的倾斜量 Tx 显示在 X 轴上，Ty 显示在 Y 轴上以直线显示）
Tilt is shown with a red line in the + direction and a blue line in the - direction. （＋方向倾斜式红线，负方向倾斜式蓝线）(7) Measurement screen display During measurement, touch the center of the screen to switch screen display
in the order of (1) → (2) → (3) → (1).
（如果在测量过程中触摸屏幕中心附近，屏幕显示将为①→②→③→① 并切换）(1): Initial screen （初始屏幕显示）（个别显示）(2): Tilt individual display

25

See p.26

(3): Measurement
See p.26

value

zoom

in

displayDoc. No. SG21-305-001E（ 放 大 显 示 测 量 值 ）A. Measurement state 2 ((2) Tilt individual screen) （测量状态 2）

Start
/Stop
(10)

SetUp

(11)

Setting
View
RemoteTx: -13'52.00
Ty: 14'45.00(10) Pointer The tilt axis pointer is displayed as a black X. （点 Tilt 轴上的点显示为黑色的 x）(11) Light reception amount bar PSD light reception amount is displayed. （接收光强显示 PSD 接收光强）A. Measurement state 3 ((3) Measurement value zoom in display) （测量状态 3 （放大显示测量值③）(12)

X: 170.000
Y: -55.000
Z: -196.000
Tx: -13'52.00
Ty: 14'45.00
Position
Height
Tilt

Start
/Stop
SetUp
Setting
View
RemoteOK
OKOK(12) Measurement value Measurement values are displayed with a zoom. （测量值26

放大显示测量值）Doc. No. SG21-305-001E
B. Measurement error state （测试异常状态）

(2)

Start
/Stop

E1 Level Low

SetUp
Setting
View
Remote

(3)

Tilt
(1)

ER

Tx: **'**.**
Ty: **'**.**

(4)

(5)

(1) PSD light reception amount is displayed as a bar graph. （PSD 接受光强显示为条形图）Green: Light reception amount is within appropriate range （绿色： 接收光强在正常范围内）
Red: Light reception amount is outside appropriate range （红色： 接收光强超出正常范围）(2) Error message （错误信息）(See p.63)

Of the errors generated by the tilt sensor, the most critical ones are displayed.
（Tilt 传感器发生的错误是最严重的，将严重显示）
The following message is displayed according to the error status, with those at the top consideredmost critical.
（根据错误异常情况会显示如下信息，严重程度等同上述传感器错误）E1 Level Low: Light reception amount level is below the lower limit value. （接收光强的值低于下限值）E2 Level Over: Light reception amount level is above the upper limit value.（接受光强的值高于上限值）E3 Area Out: Measurement value is beyond the measurement range. （测量值超出测量范围）
E9 PW Set Error: During automatic adjustment, LDPW did not reach the target light reception
amount during the regulated time.
（自动调整 LDPW 时，指定时间内接收光量未达到目标值。
）(3) Judgment results （判定结果）When an error message is displayed, the judgment value is displayed as ER.
（若有错误信息弹出则判定结果显示为 ER）(4) Measurement results (测量结果)
When an error message is displayed, the measurement value is displayed as *** ***. （若有错误信27

Doc. No. SG21-305-001E
息弹出则测量结果显示为***.***）

3.3. SetUp menu
3.3.1 Menu configuration （菜单栏构成）The settings menu configuration is shown in the figure below. （设置菜单的构成如下图所示）
SetUp

(1)
ESC

(2)

MeasureSetting

Esc

(3)

0

LDPW

Up
Down

Auto Adjustment

AutoSet

ON
OFF

(4)

OFF

Average

4 Points
16 Points
64 Points
256 Points
1024 Points
4096 Points
9600

(5)

SystemSetting(6)Enter aPassword

(8)

COM

19200
ON

(7)

(9)
KeyWord

Analog

OFF
ON

(10)

Mirror

OFF(11)
PassWord

Enter a New Pass

(13)
(12)

Save

(14)
File

Load

(15)
Delete28

Doc. No. SG21-305-001E<<Menu configuration table>>No.

Name of button

Description

Page

(1)

Esc

Shifts to the initial screen. （返回初始界面）

P.30

(2)

Measure Setting

Shifts to the measurement parameter setting screen. （移至测量参数设置界面。）

P.30

(3)

LDPW

Adjusts LD light amount. （调节 LD 光强度）

P.30

(4)

Average

Sets measurement value averaging count. （设置测量值的平均计数）

P.31

(5)

System Setting

Performs system setting. （设置系统）

P.32

(6)

Enter a Password

Inputs password. （输入密码）

P.32*Used when changing password-protected setting items. （用于更改密码保护的设置项目。
）
The initial user password is 1111. （初始用户密码「1111」）(7)

KeyWordUsed in the case of forgotten passwords. （忘记密码时使用）

P.32

(8)

Com

Sets serial communication speed. （设置串行通信速度）

P.34

(9)

AnalogSets analog output polarity. （设置模拟输出的极性）

P.34

(10)

MirrorSets measurement value mirroring display. （设置反向显示测量值。）

P.35

(11)

PassWord

Used when changing passwords. （用于更改密码）

P.33

(12)

File

Selects parameter file operation. （选择参数文件操作）

P.36

(13)

Save

Saves measurement parameter files. （保存测量参数文件）

P.36

(14)

Load

Reads measurement parameter files. （读取测量参数文件）

P.36

(15)

DeleteDeletes measurement parameter files. （删除测量参数文件）

P.36

29

Doc. No. SG21-305-001E
3.3.2 Screen configuration （屏幕构成）(3) LDPW setting screen *Screen accessed by the setup button. （LDPW 设置界面，按下 SetUp 键后的界面）
(3) LDPW button （LDPW 按钮）
Moves to the LDPW setting screen. （进入LDPW

Average(4) Average button （Average 按钮）
Moves to the average selection screen.
界面）

Esc
MeasureSetting

LDPW Setting
Tilt

0

Height0

SystemSetting

File

Auto Adjustment
Tilt
HeightON
ON（进入 Average 选择(1) ESC button （Esc 按钮）
Returns to the initial screen. （返回初始
界面）。
(2) Measurement setting button（Measure Setting 按钮）Moves to the LDPW setting screen. （进入 LDPW
(5) System setting button （System Setting 按钮）Moves to the password input screen.
P.32（进入密码输入界面）(13) File button （File 按钮）
Moves to the file screen.
（进入 File 界面）

P.36

OFF
(3.2) Auto adjustment button （ Auto
Adjustment 按钮）
Enables function ON/OFF selection.
（可以选择功能 ON/OFF）

OFF(3.1) LDPW value button （LDPW 数值 按钮）
Moves to the LDPW adjustment screen. （进入 LDPW
调节界面）
*1 When auto adjustment is set to ON, LDPW automatic adjustment takes place at measurement start.
（Auto Adjustment 设置为 ON 时，测量开始时 LDPW 将自动调整）(3.1) LDPW adjustment screen （LDPW 调节界面）

Enables manual adjustment of laser power for optimum light reception amount values. （手动调整激光功率，以使接收的光量达到最佳值。）
The level bar turns red when the light reception amount is below the error level or above themaximum light reception amount. （当接收到的光量低于错误水平值或超过最大接收光量值时，
水平条变为红色。）

Esc(3.3) ESC button （Esc 按钮）
Returns to the LDPW setting
screen. （返回 LDPW 设置界面）

UP(3.4) Up button（Up 按钮）
LD output rises. （提高 LD 输出功率）

Down(3.5) Down button（Down 按钮）
LD output falls. （降低 LD 输出功率）

AutoSet
PSD： 85000
LDPW ： 1200LDMON ： 1200

(3.6) AutoSet button（Auto Set 按钮）
PSD light reception amount （PSD 接收光量）

LD output instruction value (0 to max. 4095)（
LD output monitor (LD 输出监控器)Maximum light reception level （最大接收光值）30

Doc. No. SG21-305-001E

Light reception amount optimum level line （最合适的接收Light reception amount error level line （接收光量错误水平
Content
Remarks
Displays the PSD_SUM value. （显示 PSD_SUM 值）
Displays the LD power output instruction value. （显示 LD
Power 输出值）LDMON
Displays the LD power monitor value. （显示 LD Power 监视值）*While the light reception amount is measurable when the level bar is green, it should be set around the light
reception amount optimum level line as the optimum value. (see figure above) （接受光量的水平条呈绿色则可接收，将最优值设置在最合适的接收光量线附近）*Press the AutoSet button for automatic adjustment of the laser power light reception amount to the light
reception amount optimum level line. When automatic adjustment is not possible, an error message will be
displayed. （当按下“自动设置”按钮时，将自动调整激光功率，以使接收到的光线水平处于最佳接收到的光线水平线上。 如果无法执行自动调整，将显示错误信息。）
Item
PSD
LDPW

ERROR
Tilt LDPW Set
Error
HeightLDPW Set Error
OK

CANCEL*When the W4 or W5 error message is displayed, the white background will be displayed as yellow.
（当出现 W4、W5 的错误信息时，白色背景将变成黄色）(See p.63)(4) Average screen （Average 界面）
Averages the measurement values at designated intervals. （按指定次数平均测量值）

LDPW
Tilt

Average

Esc
OFF

MeasureSetting

OFF

SystemSettingOFFFile(4.1) Averaging selection button*1（平均化选择按钮）Selects the number of processes foraveraging. (选择平均化处理次数)

1 OFF is selected for the averaging selection button default. （OFF 是平均选择按钮的默认设置。
）
Press the averaging selection button to change the number of processes for averaging as below.
(按下平均选择按钮时，如下所示，平均处理数将发生变化。
OFF → 4 points → 16 points → 64 points
31→ 256 points → 1024 points → 4096 points → OFF*

Doc. No. SG21-305-001E(5) System setting screen (System Setting 界面)
This screen is used to proceed to the password-protected parameter change screen foradministrators' use.
（该界面是为进入到修改受密码保护的参数的界面，供管理员使用）

EscEnter a Password

MeasureSetting

KeyWord

SystemSetting

File(7) Keyword button/（KeyWord 按钮）*Press when the password has beenforgotten. Send the displayed code to
Suruga Seiki to receive the set password.
（忘记设置的密码时点此按钮。将显示的号码发给
骏河精机，本司将回复所设定的密码）

INFORMATION(6) Password button（Password 按钮）Moves to the password input screen.

38 08 38 08 38 08 38 08
38 25 38 25 38 25 38 25
OK

Password input screen （输入密码界面）- Characters which can be input: Letters

1111
A

B

C

D

E

F

BS

CL

ESC

G

H

I

J

K

L

7

8

9

M

N

O

P

Q

R

4

5

6

S

T

U

V

W

X

1

2

3

Y

Z

_

.

-

+

0

ENT

and numbers, symbols (underbar, dot,
minus, plus)（可以用于设定的文字符号：英文数字，符号（下划线，点，减号（-），加号（＋）- Character string length for input: 8
characters（可输入的字符串：8 位）
ESC: Cancels input and returns to thesave screen. （ESC：取消输入返回 Save
界面）
CL: Deletes input. （CL:清除输入内容）32

Doc. No. SG21-305-001E
BS: Deletes input from the right. （BS：从
右端起删除）
ENT: Confirms input content. （ENT：确定输入内容）※ The initial password is 1111. If the initial password is not changed with the password setting screen,
password-protected screen operation will not be possible. （初始密码时「1111」。若不通过密码设置
界面更改初始密码，则无法操作受密码保护的界面）※ The initial password (1111) cannot be used again after the password is changed. （初始密码一经更改将无法再使用）(5.1) Password-protected screen （受密码保护的界面）
This screen is used to change password-protected parameters. （更改受密码保护的参数的界面）(a) When transitioning with the initial password (1111) （初始密码「1111」过渡）Press the < or > buttons to display MENU2, and select the password button.
(按「＜」或「＞」按钮在 MENU2 上显示「PassWord」，选择此按钮）Press the "Enter a New Pass" button, set the new password, and press ESC to leave the measurement
screen temporarily. （按「Enter a New Pass」按钮，设置了新密码后按「Esc」退出）

MENU1

Switches to MENU2.
（切换至 MENU2）< COM Analog Mirror
Mirror
9600

19200

>

Esc
MeasureSetting
SystemSettingFile

33

Doc. No. SG21-305-001E
Switches to MENU1. （切换至 MENU1）(12) Password button (PassWord 按钮)Moves to the new password setting screen.（进入设置新密码界面）

MENU2

<

ErroCorrect>

PassWord

Esc
MeasureSettingEnter a New Pass

SystemSettingFile(12.1) Enter a New Pass button（Enter a New Pass 按钮）
Moves to the password input screen.
（进入输入新密码界面）P32*If the initial password is not changed, parameters cannot be changed.
（不更改初始密码的话将无法更改参数）(b) When transitioning after setting the password （设置完 PassWord 密码后的过渡）(8) COM button (COM 按钮)
Select baud rates of 9600 or 19200. （可以选择通信速度 9600 和 19200）< COM Analog Mirror
Mirror
9600

19200

>

Esc
MeasureSetting
SystemSetting

File

34

Doc. No. SG21-305-001E(9) Analog polarity setting button （模拟极性设置按钮）This screen sets whether or not the analog output polarity
is reverted. （设置是否反转模拟输出的极性的界面）< COM Analog Mirror>

MirrorAnalog Setting Invention
Tx

ON

OFF

Ty

ON

OFF

ON

OFF

ON

OFF

ON

OFF

Esc
MeasureSetting
SystemSetting

File*For analog output, see p. 43.
（有关模拟输出，请参阅第 43 页。）(10) Mirror button （Mirror 按钮）This screen sets whether or not the screen display is flipped. （设置屏幕显示是否翻转的界面）>< COM Analog Mirror
MirrorMirror Setting Invention
Tx

ON

OFF

Ty

ON

OFF

ON

OFF

Esc
MeasureSetting
SystemSetting

File

OFF
ON

OFF

35

Doc. No. SG21-305-001E(13) Save screen *Screen accessed by (12) File button.（Save 界面这是 File 按钮下的子界面）
Saves the present measurement parameters to a file. (Max. 5 items) （以文件形式保存现在的测量参数）
Press an arbitrary button to open the file name input screen. （按任意按钮将打开输入文件名称的界面）
Input the file name and press the ENT key to save the present measurement parameters to a file.
（输入文件名，按[ENT]键保存现在的测量参数）
Moves to (13) save screen. (Destination of the file button.) （进入 Save 界面（这是 File 按钮下的子界面）
Moves to (14) load screen. （进入 Load 界面）

P.37

Moves to (15) delete screen. （进入 Delete 界面） P.38

Save Load Delete

Esc
MeasureSetting

Default

SystemSetting
SURUGA_A

File*Finally, the save button or load button will
be enabled.
（最后 Save 和 Load 按钮将变为有效）(13.1) Default button （Default 按钮）*The setting as of shipping is saved;
use for file saving is not possible.
(用于保存出厂设置，无法用于保存文件)(13.2) Measurement parameters save location
Press the button to move to the file name input screen.
（按下测量参数保存场所按钮，进入文件名输入界面）

*File
names
can
be
duplicated. （文件名可重名）*When saving, the following confirmation message will be displayed. （覆盖保存时将弹出如下信息框）To save, press the OK button. （确认进行覆盖保存的话按 OK 按钮）

WARNING
Write over this file?
OK

CANCEL

36

Doc. No. SG21-305-001E(13)-1 File name input screen （文件名输入界面）- Characters which can be input: Lettersand numbers, symbols (underbar, dot,

SURUGA_G

minus, plus) （可以用于设定的文字符
号：英文数字，符号（下划线，点，减号

A

B

C

D

E

F

BS

CL

ESC

G

H

I

J

K

L

7

8

9

（-），加号（＋）- Character string length for input: 8
characters

M

N

O

P

Q

R

4

5

6

（可输入的字符串：8 位）

S

T

U

V

W

X

1

2

3

ESC: Cancels input and returns to the

Y

Z

_

.

-

+

0

ENT

save screen. （ESC：取消输入返回 Save
界面）
CL: Deletes input. CL:清除输入内容）
BS: Deletes input from the right. （BS：从
右端起删除）
ENT: Confirms input content. （ENT：确定输入内容）(14) Load screen （Load 界面）
Reads measurement parameter files saved in advance. (读取预先保存的测量参数文件)※ At initial startup, "Default" is selected. （首次启动时处于「Default」）

Save Load Delete

Esc
MeasureSetting

Default

SystemSetting
SURUGA_A

File(14.1) Measurement parameters savelocation
Press the button to brighten, enabling
the saved measurement parameters.
（按下测量参数保存地方的按钮此处变亮，保存的参数将变有效）*Finally, the save button or load button will be enabled.
（最后 Save 和 Load 按钮将变有效）*The following confirmation message will be displayed. To load, press the OK button.
（弹出如下信息框，确认 Load 的话，按下 OK 按钮）

WARNING
Load this file?
OK
37

CANCELDoc. No. SG21-305-001E(16) Delete screen （删除界面）
Deletes measurement parameter files. （删除测量参数文件）※ Default files are not deleted. （Default 文件无法删除）Save Load Delete

Esc
MeasureSetting

Default

SystemSetting
SURUGA_A

File(16.1) Measurement parameters save location
Press the button to elicit the delete
confirmation message.
（测量参数保存场所按下按钮将弹出确认删除的信息）*Finally, the save button or load button will be enabled.
（最后 Save 和 Load 按钮将变有效）*The following confirmation message will be displayed. To delete, press the OK button.
（弹出如下信息框，确认删除的话，按下 OK 按钮）

WARNING
Delete this file?
OK

CANCEL

38

Doc. No. SG21-305-001E

3.4 Other （其他）
3.4.1 Setting remote mode（远程连接的设置）Press the measurement screen remote button to switch to remote status and enable I/O or communicationcommand input. With partial exceptions, touch panel screen input will be disabled.
Because remote mode is remembered, the unit will launch in remote mode as of the next power source on.
（按下测量画面的 Remote 按钮，进入远程连接状态，I/O 输入和通讯指令的输入有效，触摸屏上一部分输入界面无效。另外，因为远程连接会被记忆，下一次开启电源时将自动启动远程连接模式）

Start
/Esc

(3.4.2) Remote cancel button （Remote 取消按钮）Cancels remote mode. （取消远程模式）

SetUp
Setting
View
Remote(3.4.2) Remote button （远程模式按钮）(3.4.1)status.
Enters remote mode.
（变为远程模式）*Measurement screen display switching is also possible in remote mode. （在远程模式下也可切换测量屏幕显示）3.4.2 Canceling remote mode（取消的远程模式）
In measurement stop status, hold down the Start/Esc buttons for at least 4 seconds. （在测量停止状态，长按[Start/Esc]按钮 4 秒以上）

During measurement in remote mode, hold down the Start/Stop buttons for at least 4 seconds to stopmeasurement. (远程模式下测量中时长按[Start/Esc]按钮 4 秒以上可以停止测试)

Start
/Stop
SetUp
Setting
View
RemoteTilt

OK

Tx: -13'52.00
Ty: 14'45.00*During measurement in remote mode, measurement will be canceled when a remote cancel commandis sent.（远程模式下测量中发出取消远程模式的命令时测试将自动停止）39

Doc. No. SG21-305-001E

4. Connecting External Devices（外部设备的连接）4.1 I/O interface (H920-P500) （I/O 介面）
The following control I/O is available for removable terminals.
（有些端子有可能脱落，请参照下表的输入/输出控制）
For wiring, see the interface circuit diagram on p. 42.
（接线请参照 P42 页介面回路图）
Type

Pin
No
.

Signal Name

Description

IO
Input

1

IN1

Start
(Tilt/Height/Position)

2

IN2

Stop
(Tilt/Height/Position)

3

IN3

Serial_Output(Data Request)

4

IN4

－

Measurement stop → Transition tomeasurement state（测量停止=>测量状态过渡中）
Measuring → Transition tomeasurement stop state（测量中=>测试停止状态过渡中）
Measurement results as of this signal
input are output as serial data（输入该信号时的测量结果为串行数
据输出）
－

5

IN5

－

6

IN6

7

IO
Outpu
t

Measur
ement
Start
State
－

Measur
ement
Stop
State
EnableEnable－EnableEnable

－

－

－

－

－

－

－

－

－

IN7

－

－

－

－

8

IN8

－

－

－

－

9

HSIN

Not assign

－

－

－

10

DGND

Digital GND

－

－

－

1

OUT1

Status(Busy)Busy
State
OutputReady
State
Output2

OUT2

GO/NG_Tilt

EnableEnable3

OUT3－"L" = Busy (during measurement state)（测量中状态）"Open" = Ready (measurement stop
state) （测量停止状态）"L" = Tilt judgment NG/E1/E2/E3"Open" = Tilt judgment OK*Synchronized with measurement
screen judgment display content（与测量屏幕上的判断同步显示）
－

－

－

4

OUT4

－

－

－

－

5

DGND

Digital GND

－

－

－

*Input signal can be executed only in remote mode （输入信号只能在远程模式下执行）*GO/NG signals during measurement stop output NG state （测量停止期间的 GO / NG 信号输出 NG 状态）40

Doc. No. SG21-305-001E
・ Control I/O operation timing chart (H920-P500) （控制输入/输出操作时序图）41

Doc. No. SG21-305-001E
・ I/O interface circuit (H920-P500) （IO 介面回路图）Processor I/O Internal Circuit

5V 5V 5V 5V 5V 5V 5V 5V 5V
10KΩ
100Ω

IN1
IN2
IN3
IN4
IN5
IN6
IN7
IN8
HSIN

DGND

OUT1
OUT2
OUT3
OUT4
DGND

*To turn IN1 to HSIN input ON, short-circuit the input terminals and GND terminal with a no voltage
contact such as a switch, etc. （请使IN1~HSIN在输入ON状态，各输入端子和GND端子的通过开关非电压触电短路）*Connect OUT1 to 4 output to a current load of 30 V or less and 50 mA or less. Residual voltage is 0.3 V
or less.
（将OUT1-4的输出处连接30V以下，50mA以下的电流负载，残留电压在0.3V以下。
）*IN1 to HSIN: 5 V TTL level; OUT1 to 4: open collector (开集器)42

Doc. No. SG21-305-001E

4.2 Analog output （模拟量输出）
4.2.1 Analog interface （模拟接口）The following analog output and high-speed output are available for removable terminals.
（对于有可能脱落的端子，下表为模拟输出和告诉输出）For wiring, see the interface circuit diagram on p. 42.
（接线请参照 P42 介面回路图）Signal name
DGND

Signal content
Digital GND （GND 信号）

Description
GND for HSOUT （HSOUT 用 GND）
Measurement state high-speed digital output (5 V TTL level) （测量状态的

HSOUT

Measurement state high-speed
output （测量状态的高速输出）高速输出（5VTTLLevel）
L = Analog output enabled / H = Analog output disabled （L=模拟输出有效／H=模拟输出无效）

Analog GND （模拟 GND）

AGND
Analog ch1+
Analog ch1Analog ch2+
Analog ch2-

GND for analog output （模拟输出用 GND）

Analog output for ch1+ (Tx axis)（ch1+(Tx 轴)模拟量输出）

Measurement results analog output （测量结果模拟量输出）

Analog output for ch1- (Tx axis)

・ Analog output voltage +/-10 V （模拟量输出电压: +/-10V）（ch1-(Tx 轴)模拟量输出）

・ Output impedance: 50 Ω （输出阻抗: 50Ω）

Analog output for ch2+ (Ty axis)

・ Offset voltage: +/-5 mV （电压偏差: +/-5mV）（ch2+(Ty 轴)模拟量输出）*Analog signal recommended handling method: Differential signal （建议Analog output for ch2- (Ty axis)

模拟信号处理方式：差分信号）（ch2-(Ty 轴)模拟量输出）

Analog voltage proportional to the measurement value can be output from the analog terminals (ch1,ch2).
The processor tilt analog output ch1 and ch2 are respectively equivalent to the Tx and Ty measurement
values. （可以从模拟端子（ch1，ch2）输出与测量值成比例的模拟电压。
处理器的 Tilt 模拟输出 ch1 和 ch2 分别对应于 Tx 和 Ty 的测量值。
）

Analog output takes place only during measurement ([Start]), and is retained during measurement stop([Stop]).
（模拟输出仅在测量期间（[开始]）输出，在测量停止期间（[Stop]）保持。
）

43

Doc. No. SG21-305-001E<Recommended analog signal wiring>（建议模拟信号接线）Processor

Differential Type

Single-Ended TypeA/D Analog Input

A/D Analog Input

Tilt Analog Output(+)
50Ω

Analog
AMP(Tilt_X+)Ch1+
(-)

ch**
+
-

(+)
AnalogAMP

AGND(Tilt_X-)Ch150Ω

(Tilt_Y+)Ch2+(-)(Tilt_Y-)Ch2※5V TTL Level
AGND

ch**
+
-

AGND

(Analog_Invalid_Output)HSOUTInternal Short

DGND

44

AGND

Doc. No. SG21-305-001E
4.2.2 Relations between measurement values and output voltage （测量值与输出电压的关系）
All Analog Sign Inv. settings OFF (default) shown.
See p. 35 to change these settings.
(Analog Sign Inv.设置全部为 OFF（默认）时表示)有关更改此设置，请参阅第 35 页。
4.2.2 Tilt processor (Analog Sign Inv. settings OFF) （Tilt 处理器）(1) Tx (Ch1)(2) Ty (Ch2)45

Doc. No. SG21-305-001E

4.3 Serial interface （串行接口）
4-3-1 Specifications（仕样）Conforms to EIA and RS-232C （EIA and RS-232C 合规）Communication format （通信方式）: Start-stop synchronization type （异步类型）

Transmission code （传输码） : ASCII format
Data bit length （数据位长）: 8bitStop bit length （停止位长）: 1bitParity check （奇偶校验） : None （无）Baud rate （波特率） : 9600, 19200 bit/sec selected
Flow control （流量控制） : None （无）Connector pin number （连接器针脚编号）
Pin
numberSignal
name

1

NC

－

2

RXD

Receiving data（收到的数据）3

TXD

Sending data
（发出的数据）4

DTR

Normally ON（始终 ON）

5

GND

－

6

NC

－

7

RTS

Normally ON（始终 ON）

8

NC

－

9

NC

－

Remark**Use a D-sub 9-pin (female-female) cross cable for connection with the computer.
（使用 DSub 9 针（母对母）交叉电缆连接到个人计算机。）

46

Doc. No. SG21-305-001E
4.3.2 Control command list （控制命令表）
Remote control of readout of measurement results and setting content as well as changing of setting content
is possible by sending control commands from the host device. （通过从主机发送控制命令，可远程控制读
取测量结果和设置内容，并更改设置内容。）*Operates only in remote status, with some commands excepted. （除了一部份命令，其余只能在远程状态下执行）
To switch to remote status, send a remote request command. （切换远程状态请发出远程请求命令）
To cancel remote status, hold down the ESC button or send a remote cancel command.)（取消远程状态可长按 Esc 键发出取消远程连接命令）#

Command name(1)

File reading （读取文件）

(2)
(3)
(4)
(5)
(6)

File information readout （读取文件信息）
Setting value readout （读取设定值）Moving average point countreadout （读取移动平均点）
Analogpolarity
reversion
setting readout（读取 Analog 极性反转设置）Measurement value readout（读取测量值）Content of

Description

Command
R000

Reads saved settings files. （读取已保存的设置文件）

R001

Reads saved file information. （读取以保存文件里的信息）

R002

Reads present settings. （读取现在的设定值）

R005

Reads the sampling point count for the moving average process. （读取移动平均处理的采样点数）

R006

Reads the analog output polarity reversion setting. （读取 Analog 极性反转
设置）

R009

Reads measurement results. （读取测量结果）(7)

LD monitor readout （读取 LD
显示屏）

R010

Reads the LD monitor. （读取 LD 显示屏）(8)

File saving (保存文件)

W000

Saves present settings. （保存现在的设定）

W001

Rewrites saved file information. （覆盖替换已保存的文件的信息）

W002

Individually rewrites parameter settings. （分别重新设定参数）

W003

Rewrites all parameter settings. （全部重新设定参数）

W005

Sets the sampling point count for the moving average process. （设置移动平均处理的采样点数）

(9)
(10)
(11)
(12)

File information setting (设置文件信息)Setting value setting （设置设定值）Setting value batch setting （设定值批量设定）Moving average point countsetting （移动平均点数设置）(13)

Analogpolarity
reversion
setting （Analog 极性反转设置）

W006

Sets the analog output polarity reversion. （Analog 输出极性反转设置）(14)

Measurement stop （停止测量）S000

Stops measurement. （停止测量）(15)

Measurement start （开始测量）

S001

Starts measurement. （开始测量）

S002

Cancels remote mode. （取消远程连接）S003

Switches to remote mode. （切换至远程连接）S005

Adjusts LD output to suitable values. （适当调整 LD 输出功率）

(16)
(17)
(18)

Remote cancel （取消远程连
接）Remote request （请求远程连
接）LD
outputautomatic
adjustment （自动调节 LD 输出功率）

47

Doc. No. SG21-305-001E
4.3.3 Control command format （控制命令格式）(1) File reading (R000) （读取文件）
Command （命令）R000

Command name （命令名）

File reading （读取文件）

Reads setting information from files. （读取文件信息）Overview

Transmission format （传输格式）

When the designated file name exists, reads setting information from the relevant file.
When the designated file name does not exists, an error is returned.
（当指定的文字名存在时，读取该文件的信息，当指定的文件名不存在时，弹出错误信息）R000,[1]No

Lower limit value

Upper limit value

Digits after decimal（小数位数）

Max. 8

-

-

No

Name

No. of characters

Lower limit value

Upper limit value

Digits after decimal（小数位数）

[1]

-

-

-

-

-

[1]

Receiving parameters （接收参数）

No. of characters

File
name
（文件
名）

Sending parameters （传输参数）

Reception format （接收格式）

Name

0

Remarks （备注）Designates file nameto be read.
（命名保存的文件名）
Up to 40 characters
can be used.
（可用于命名的字符
为如下 40 个）Uppercase letters A
to Z,（大写字母「A～Z」）
Numbers 0 to 9,（数字「0～9」）
Symbols _, ., -, and +（符号「_」「.」「-」
「+」）

R000

48

Remarks （备注）Doc. No. SG21-305-001E(2) File information readout (R001) （读取文件信息）Command （命令）R001

Command name （命令名）

File name readout （读取文件信息）Overview

Reads file name. （读取文件信息）Transmission format （传输格式）

R001

Sending parameters （传输参数）

Reception format （接收格式）

No

Name

No. of characters

Lower limit value

Upper limit value

Digits after decimal

Remarks （备注）

[1]

-

-

-

-

-

-

Lower limit value

Upper limit value

Digits after decimal

Remarks （备注）R001,[1],[2],[3],[4],[5],[6],[7]
No

Name

[1]

File
numberread atstartup
（启动
时读取
文件编
号）

1

[2]

Saved
file
name 1
保存文
件名 1

8

-

-

0

8

-

-

0

Output the file namesaved for file 2. （输出保存在文件 2 中的
文件名。）

8

-

-

0

Output the file namesaved for file 3. （输出保存在文件 3 中的
文件名。）

8

-

-

0

Output the file namesaved for file 4. （输出保存在文件 4 中的文件名。）

Receiving parameters （接收参数）
[3]

[4]

[5]

[6]

[7]

Saved
file
name 2
保存文
件名 2
Saved
file
name 3
保存文
件名 3
Saved
file
name 4
Saved
file
name 5
保存文
件名 5
Saved
file
name 6
保存文
件名 6

No. of characters

1

6

0

Indicates the filenumbers read atstartup. （启动时读取文件编号）The last file number
read after processor
startup is applied.
（处理器在启动后
应用最后读取到的文件编号）
Output the file namesaved for file 1. （输出保存在文件 1 中的文件名。）
Because File 1 is thebasic setting, its
name is fixed.
（文件 1 具有固定名
称，因为它是基本设
置。）"DEFAULT"

8

-

-

0

Output the file namesaved for file 5. （输出保存在文件 5 中的
文件名。）

8

-

-

0

Output the file namesaved for file 6. （输出保存在文件 6 中的
文件名。）

49

Doc. No. SG21-305-001E(3) Setting value readout (R002) （读取设定值）Command （命令）R002

Command name （命令名）

Setting value readout （读取设定值）

Overview

Reads parameters related to measurement. （读取测量的设置参数）

Transmission format （传输格式） R002,[1]
No

Name

No. ofcharacters

Lower limit
valueUpper limit
value

Digits after
decimal（小数位数）

Remarks （备注）Designates thetarget sensor
type.
（指定目标传感
器的类别）
0：TiltSending parameters （传输参数）[1]

Reception format （接收格式）

Sensor type （传
感器类别）

-

-

-

Lower limit
valueUpper limit
value

R002,[1],[2],[3]No. ofcharacters

Digits after
decimal（小数位数）

No

Name

[1]

LD output （LD
输出）

4

0

4095

0

[2]

Automatic
dimming （自动
调光）

1

-

-

0

[3]

Mirror reversion（镜头反转）

1--

0

Receiving parameters （接收参数）
Sensor type: Tilt
（传感器类别：Tilt）

50

Remarks （备注）Reads the LD
output. （读取 LD输出功率）
Reads automatic
dimming settings
at measurement
start.
（读取开始测量
时自动调节光设定）
0: Automatic
dimming OFF （自动调节 OFF）
1: Automatic
dimming ON （自动调节 ON）
Reads mirror
reversion
settings.
（读取镜头反转设定）
0: Tx/Ty axes
mirror reversion
OFF （TxTy 轴镜头反转 OFF）
1: Tx axis mirror
reversion ON （Tx轴镜头反转 ON）
2: Ty axis mirror
reversion ON （Ty轴镜头反转 ON）
3: Tx/Ty axes
mirror reversion
ON （TxTy 轴镜头反转 ON）

Doc. No. SG21-305-001E(4) Moving average point count readout (R005) （读取移动平均点数）
Command （命令）R005

Command name （命令名）

Moving average point count readout （读取移动平均点数）

Overview

Reads moving average point count for each sensor type. （读取各种传感器的移动平均点数）

Transmission format （传输格式）

R005

Sending parameters（传输参数）No

Name

No. of characters

Lower limit value

Upper limit value

Digits after decimal

Remarks （备注）

[1]

-

-

-

-

-

-

No. of characters

Lower limit value

Upper limit value

Digits after decimal

Remarks （备注）0

Reads the tilt
moving average
sampling count.
（读取 Tilt 的移动
平均采样数。
）
0: No moving
average process（无平均移动）1: 4-point moving
average (4 点平均
移动)
2: 16-point moving
average (16 点平均
移动)
3: 64-point moving
average (64 点平均
移动)
4: 256-point
moving average(256 点平均移动)
5: 1024-point
moving average(1024 点平均移动)
6: 4096-point
moving average(4096 点平均移动)

Reception format （接收格式）

R005,[1]No

Receiving parameters （接收参数）

[1]

Name

Tilt_Moving average
point
count
（Tilt 平
均移动点
数）

1

-

51

-

Doc. No. SG21-305-001E(5) Analog polarity reversion setting readout (R006) (读取 Analog 极性反转设定)Command （命令）R006

Command name （命令名）

Analog polarity reversion setting readout （读取 Analog 极性反转设定）

Overview

Reads the analog output polarity reversion setting. （读取 Analog 输出的极性反转设定）Transmission format （输出格式）

R006

Sending parameters （输出参数）

Reception format （接收格式）

No

Name

No. of characters

Lower limit value

Upper limit value

Digits after decimal（小数位数）

Remarks （备注）

[1]

-

-

-

-

-

-

No. of characters

Lower limit value

Upper limit value

Digits after decimal

Remarks

R006,[1],[2]
No

Name

[1]

Analogpolarity
reversion
setting_Tx
axis(Analog
极性反转
设定 Tx
轴）

1

Analogpolarity
reversion
setting_Ty
axis(Analog
极性反转
设定 Ty
轴）

1

Receiving parameters （接收参数）

[2]

-

-

52

-

-

0

0

Reads the Tx axis
analog polarity
reversion setting.
（读取 Tx 轴的
Analog 极性反转设
定）
0: Not reverted（0：无反转）1: Reverted （1：有反转）
Reads the Ty axis
analog polarity
reversion setting.
（读取 Ty 轴的
Analog 极性反转设定）
Status content
same as [1] （状态
内容同[1]）

Doc. No. SG21-305-001E(6) Measurement value readout (R009) （读取测量值）Command （命令）R009

Command name （命令名）

Measurement value readout （读取测量值）

Overview

Reads present measurement results. （读取现在的测量结果）Transmission format （传输
格式）

R009

Sending parameters （传输参数）

Reception format （接收格
式）

No

Name

No.
of
cha
ract
ers

[1]

-

-

-

-

-

No.
of
cha
ract
ers

Lower
limit
value

Upper
limit
value

Digits after
decimalRemarks （备注）
（小数位数）

Upper
limit
value

Digits after
decimalRemarks （备注）
（小数位数）-

R009,[1],[2],[3],0.0,0.0,0No

Receiving parameters （接
收参数）

Lower
limit
value

[1]

Name

Tilt_Judgment
result（Tilt 判断结
果）

1

-

-

0

Reads tilt judgment results.
Output differs depending on judgment range settings.
（读取对 Tilt 的判断结果，根据设置的判断范围不同输出的结果不同）<Judgment range: Unset> （判断范围：未设定）
Error generated: E （发生错误： E）
Error not generated: * （未发生错误：*）<Judgment range: Setting> （判断范围:有设置）Error generated: E （发生错误： E）
Within judgment range: O （判断范围内：O）
Outside judgment range: N （判断范围外：N）

[2]

[3]

Tilt_Present value
Tx(Tilt_现在值 Tx)
Tilt_Present value
Ty(Tilt_现在值 Ty)

6-1800018000

0Reads Tx axis measurement values.
（读取 Tx 轴的测量结果）

6-1800018000

0Reads Ty axis measurement values.
（读取 Ty 轴的测量结果）53

Doc. No. SG21-305-001E(7) LD monitor readout (R010) （LD 显示器读出）
Command （命令）R010

Command name （命令名）

LD monitor readout

Overview

Reads the LD monitor value. （读出 LD 显示器的值）（LD 显示器读出）

Transmission format （传输格式） R010
No
Sending parameters （传输参数）[1]
Reception format （接收格式）

Receiving parameters （接收参
数）

Name

No. ofcharacters

Lower limit
valueUpper limit
value

Digits after decimal（小数位数）----

No. ofcharacters

Lower limit
valueUpper limit
value

Digits after decimal （小数位数）

Remarks （备注）R010,[1]
N
o

Name

[1
]

Tilt_LD
monito
r

4

0

4095

Remarks （备注）0

Reads the tilt LD
monitor value.
（读出 LD 显示
器的值）(8) File saving (W000) （保存文件）
Command （命令）W000

Command name （命令名）

File saving （保存文件）
Saves present setting information in files. （现在的设置信息保存成文件）

Overview

Transmission format（传输格式）

When the designated file name has already been saved, it is overwritten. （指定的文件名已存在时，覆盖）
If the file name does not exist and there is an unsaved file area, a file will be created with the newly designated file name.
（如果文件名不存在，并且有未保存的文件区域，则将使用新指定的文件名来创建它。
）
If the file name does not exist and there is no unsaved file area, an error will be returned.
（如果文件名不存在，并且没有未保存的文件区域，则返回错误。）
Up to 5 files can be saved. （最多可保存 5 份文件）W000,[1]NoSending parameters（传输参数）

Reception format （接收格式）

Receiving parameters （接收参
数）

Nam
e

No. ofcharacters

Lower limit
valueUpper limit
value

Digits after
decimal（小数位数）

File
nam
e
（文
件
名）

Max. 8

-

-

N
o

Nam
e

No. ofcharacters

Lower limit
valueUpper limit
value

Digits after
decimal（小数位数）

[1
]

-

-

-

-

-

[1
]

Remarks （备注）0

Designates file name to be saved.
（命名保存的文件名）
Up to 40 characters can be used.
（可用于命名的字符为如下 40 个）Uppercase letters A to Z,（大写字母「A～Z」）
Numbers 0 to 9,（数字「0～9」）
Symbols _, ., -, and +（符号「_」「.」「-」
「+」）

W000

54

Remarks （备注）Doc. No. SG21-305-001E(9) File information setting (W001) （设定文件信息）Command （命令）W001

Command name （命令名）

File information setting （设定文件信息）Overview

Sets file information. （设定文件信息）Transmission format （传输格式）

W001,[1],[2]No[1]Settingchangeitems （设
定更改项
目）

[2]

Setting
items （设定项目）*When"a" isdesignatedfor [1]
Settingchangeitems （在[1]设定更
改项目中
指定「a」
时）
Setting
items （设定项目）*Whenother than"a" isdesignatedfor [1]
Settingchangeitems （在[1]设定更
改项目中
指定「a」
以外时）

Sending parameters （传输格式）

Reception format （接收格式）
Receiving parameters （接收参数）

Name

No. of characters

1

Lower limit value-

1

Upper limit value

Digits after decimal（小数位数）-

1

6

Max. 8--Remarks

0

Designates settings to
be changed.
（指定更改设定）a: File number read atstartup（a:启动时读取的文件号）
b: Saved file 2 （b:保存文件 2）
c: Saved file 3 （c:保存文件 3）
d: Saved file 4 （d:保存文件 4）
e: Saved file 5 (e:保存
文件 5）
f: Saved file 6 （f:保存文件 6）

0

Indicates the filenumbers read atstartup.
The files with thenumbers designatedhere will be read at
the next startup.
（指示启动时读取的文件号。
下次启动时将读取此处指定编号的文件）

0Changes the names offiles designated in [1].
（更改[1]指定的文件
名称）
Up to 40 characters
can be used.
（可使用以下 40 个字
符命名）
Uppercase letters A
to Z,（大写字母「A～Z」）
Numbers 0 to 9,（数字「0～9」）
Symbols _, ., -, and +（符号「_」
「.」
「-」
「+」）

W001
No

Name

No. of characters

Lower limit value

Upper limit value

Digits after decimal(小数位数)

Remarks （备注）

[1]

-

-

-

-

-

-

55

Doc. No. SG21-305-001E(10) Setting value setting (W002) （设定设定值）Command （命令）W002

Command name （命令名）

Setting value setting （设定设定值）Overview

Sets parameters related to measurement. （设定测量相关参数）Transmission format （传输格式）

W002,[1],[2],[3]No. of characters

Lower limit value

Upper limit value

Digits after decimal（小数位数）

No

Name

[1]

Sensor type
（传感器类
型）

1

-

-

0

[2]

Identification
（识别）

1

-

-

0

No

Name

Lower limit value

Upper limit value

Digits after decimal（小数位数）

04095

0Sets the LD output. （设定 LD 输出功率）

0

Sets automatic dimming.
（设置自动调光）0: Automatic dimming
OFF（0：自动調光 OFF）
1: Automatic dimming
ON （1：自动調光 ON）

0

Sets mirror reversion.
（设置镜头反转）
0: Tx/Ty axes mirror
reversion OFF （0：TxTy
的镜头反转 OFF）
1: Tx axis mirror
reversion ON （1：Tx的镜头反转 ON）
2: Ty axis mirror
reversion ON （2： Ty
的镜头反转 ON）
3: Tx/Ty axes mirror
reversion ON （3：TxTy
的镜头反转 ON）

Sending parameters （传输参数）
Common part （共同点）

Sending parameters （传输参数）
Sensor type: Tilt
（传感器类型：Tilt）

Reception format （接收格式）
Receiving parameters （接收参数）[3]

No. of characters

LD output（LD 输出）*When "a"isdesignatedfor [1] （[1］中指定了 a时）
Automatic
dimmingsetting （设定自动调光）*When "b"isdesignatedfor [1]（[1］中指定了 b 时）--

Mirrorreversion（镜头反转）*When "c"isdesignatedfor [1]（[1］中指定了 c 时）

-

No

Name

No. of characters

Lower limit value

Upper limit value

[1]

-

-

-

-

-

-

Remarks （备注）Designates the target
sensor type.
（指定目标传感器类型。）
0: Tilt
Designates parameters
to be changed.
（指定要更改的参数）
a: Designates LD output.
（a：指定 LD 输出功率）
b: Designates automatic
dimming. （b：指定自动调光）
c: Designates mirror
display. （c：指定镜头
显示）
Remarks （备注）

W002

56

Digits after decimal0

Remarks （备注）-Doc. No. SG21-305-001E(11) Setting value batch setting (W003) （设定值批量设定）Command （命令）W003

Command name （命令名） Setting value batch setting （设定值批量设定）Overview

Sets parameters related to measurement as a batch. (相关测量参数批量设定)Transmission format （传输格式）W003,[1],[2],[3],[4]Sending parameters （传输参数）Common part （共同）Name

No. ofcharacters

Lower limit
valueUpper limit
value

[1
]

Sensor
type
（传感
器类
别）

-

-

-

N
o

Name

No. ofcharacters

Lower limit
valueUpper limit
value

Digits after
decimal（小数位数）

Remarks （备注）

-

0

4095

0

Sets the tilt LD output.
（读取 Tilt 的 LD 输出功率）

-

-

-

0

Sets automatic dimming settings.
（读取自动调光设定）
0: Automatic dimming OFF （0：自动調光 OFF）
1: Automatic dimming ON （1：自动調光 ON）[2]

Sending parameters
Sensor type: Tilt

[3]

Receiving parametersLD
output
（LD 输
出）
Autom
atic
dimming （自动调光）

Remarks （备注）Designates the target sensor type.
（指定目标传感器类别）
0：TiltMirrorreversi
on （镜
头反
转）

-

-

-

0

Sets mirror reversion settings.
（读取镜头反转设定）
0: Tx/Ty axes mirror reversion OFF （0：TxTy 轴镜头反转 OFF）
1: Tx axis mirror reversion ON （1：Tx 轴镜头反转 ON）
2: Ty axis mirror reversion ON （2：Ty 轴镜头反转 ON）
3: Tx/Ty axes mirror reversion ON （（3：TxTy 轴镜头反转 ON）

N
o

Name

No. ofcharacters

Lower limit
valueUpper limit
value

Digits after
decimal（小数位数）

Remarks （备注）

[1
]

-

-

-

-

[4
]

Reception format

Digits after
decimal（小数位数）

N
o

W003

57

-

Doc. No. SG21-305-001E(12) Moving average point count setting (W005) （设定平均移动点数）Command （命令）W005

Command name （命令名）

Moving average point count setting （设定平均移动点数）Overview

Sets moving average point count for each sensor type. （设定各传感器的平均移动点数）Transmission format （传输格式）

W005,[1],[2]
No

Name

[1]

Sensor
type
（传感
器类别）

No. of characters-

Lower limit value-

Upper limit value

Digits after decimal（小数位数）-

0

Designates the target
sensor type.
（指定目标传感器类别）
0：Tilt0

Sets moving average
point count.
（指定平均移动点数）
0: No moving average
process （0： 无平均移动）
1: 4-point moving
average （1：平均移动 4 点）
2: 16-point moving
average （2：平均移动 16 点）
3: 64-point moving
average （3：平均移动 64 点）
4: 256-point moving
average （4：平均移动 256 点）
5: 1024-point moving
average （5：平均移动 1024 点）
6: 4096-point moving
average （6：平均移动 4096 点）

Sending parameters （传输参数）[2]

Reception format
Receiving parameters

Movingaverage
point
count
（平均
移动点
数）

1

-

-

Remarks （备注）

W005
No

Name

[1]

-

No. of characters
1

Lower limit value

Upper limit value

Digits after decimal

Remarks

-

-

-

-

58

Doc. No. SG21-305-001E(13) Analog polarity reversion setting (W006) （设定 Analog 极性反转）
Command （命令）W006

Command name （命令名）

Analog polarity reversion setting （设定 Analog 极性反转）Overview

Sets the analog output polarity reversion status. (设定 Analog 输出的极性反转状态)Transmission format （传输格式）

W006,[1],[2]
No

Name

No. of characters

Lower limit value

Upper limit value

Digits after decimal（小数位数）

[1]

Axis
（轴）

1

-

-

0

[2]

Analogpolarity
reversion
setting（设定Analog 极
性反转）

1

-

-

0

Sending parameters （传输参数）

Reception format （接收格式）
Receiving parameters （接收参数）

Remarks （备注）Designates thetarget axis.
（指定目标轴）0: Tx axis （0： Tx
轴）
1: Ty axis （1：Ty轴）Designates theanalog polarity
reversion setting.
（指定设置 Analog极性反转）
0: Not reverted（0：无反转）1: Reverted （1：有
反转）

W006
No

Name

No. of characters

Lower limit value

Upper limit value

Digits after decimal（小数位数）

Remarks （备注）

[1]

-

-

-

-

-

-

59

Doc. No. SG21-305-001E(14) Measurement stop (S000) （停止测量）Command （命令）S000

Command name （命令名）

Measurement stop （停止测量）Stops measurement. （停止测量）Overview

Transmission format （传输格式）
Sending parameters （传输参数）

Reception format （接收格式）
Receiving parameters （接收参数）

When executed during measurement stop, an error is returned.
（若已经停止测量，执行该命令将弹出错误信息）

S000
No

Name

No. of characters

Lower limit value

Upper limit value

Digits after decimal（小数位数）

[1]

-

-

-

-

-

No

Name

No. of characters

Lower limit value

Upper limit value

Digits after decimal（小数位数）

[1]

-

-

-

-

-

Remarks （备注）S000
Remarks （备注）(15) Measurement start (S001) （开始测量）
Command （命令）S001

Command name （命令名）

Measurement start （开始测量）
Starts measurement. （测量开始）

Overview

Transmission format (传输格式)
Sending parameters （传输参数）

Reception format （接收格式）
Receiving parameters （接收参数）

When executed during measurement, an error is returned.
（若处于测量中，执行该命令将弹出错误信息）

S001
No

Name

No. of characters

Lower limit value

Upper limit value

Digits after decimal（小数位数）

[1]

-

-

-

-

-

No

Name

No. of characters

Lower limit value

Upper limit value

Digits after decimal（小数位数）

[1]

-

-

-

-

-

Remarks（备注）

S001
Remarks（备注）(16) Remote cancel (S002) （取消远程连接）Command （命令）S002

Command name （命令名）

Remote cancel （取消远程连接）Cancels remote status. （取消远程连接）Overview

Transmission format （传输格式）
Sending parameters （传输参数）

Reception format （接收格式）
Receiving parameters （接收参数）

When executed during remote cancel, an error is returned.
（若已经是非远程连接状态，将弹出错误信息）

S002
No

Name

No. of characters

Lower limit value

Upper limit value

Digits after decimal（小数位数）

[1]

-

-

-

-

-

No

Name

No. of characters

Lower limit value

Upper limit value

Digits after decimal(小数位数)

[1]

-

-

-

-

-

Remarks （备注）

S002

60

Remarks （备注）Doc. No. SG21-305-001E(17) Remote request (S003) （请求远程连接）Command （命令）S003

Command name （命令名）

Remote request （请求远程连接）Switches to remote status. （切换至远程连接状态）Overview

Transmission format

When executed during remote status, an error is returned.
（已处于远程连接状态时，弹出错误的信息）

S003
3

Name

No. of characters

Lower limit value

Upper limit value

Digits after decimal（小数位数）

[1]

-

-

-

-

-

No

Name

No. of characters

Lower limit value

Upper limit value

Digits after decimal（小数位数）

[1]

-

-

-

-

-

Sending parameters

Reception format
Receiving parameters

Remarks（备注）

S003
Remarks（备注）(18) LD output automatic adjustment (S005) （LD 输出功率自动调节）Command （命令）S005

Command name （命令名）

LD output automatic adjustment （LD 输出功率自动调节）Adjusts LD automatic dimming so that the PSD light reception amount matches the light reception amount target value.
Overview（LD 自动变调节光量，以使 PSD 的接收光量达到目标值。
This command is enabled only during measurement. （该命令仅在测量中有效）Transmission format （传输格式）

S005, [1]No

Sending parameters(传输参数)[1]Name

No. of characters

Sensor
type
（传感
器种类）

1

Lower limit value-

Upper limit value-

Digits after decimal（小数位数）-

Remarks （备注）Designates the target
sensor type.
（指定目标传感器类型）
0：TiltReception format （接收格式）

S005

Receiving parameters（接收参数）

No
[1]

Name

No. of characters

Lower limit value

Upper limit value

Digits after decimal（小数位数）----

Remarks （备注）<Measurement value> （测量值）Response data measurement values differ by processor type.
The various processor display formats are shown below.
（测得的响应数据取决于处理器类型。
每个处理器的显示格式如下所示。
）○ Tilt processor （倾斜处理器）The format differs from the measurement values displayed onscreen. （与屏幕显示的测量值格式
不同）
Units are seconds, with 1 sign digit and 5 integer digits. （单位为秒，一个符号位，五个整数位）
Display example: -12345 (sec)61

Doc. No. SG21-305-001E

4.4 Communication errors （关于通信错误）When a command cannot be received or executed normally, the device will return an error
command in the format below. （如果无法正常接收命令或无法执行该命令，则本机将以以下格式返回错误命令。
）
Time

Host

S/R/W

･

CR LF

WR-LAC

E

R

,

*

CR LF

Error command content （错误命令内容）#

Error name

Error content

1・ Number of received characters from "S" to LF is 7 or more （从“ S”到 LF
的接收字符数为 7 个及以上）・ Number of received characters from "R" to LF
is 16 or more （从“ R”到 LF 的接收字符数为 16 个及以上）Communication error （通信错误）・ Number of received characters from "W" to LF is 100 or more 从“ W”到LF 的接收字符数为 100 个及以上）・ Overrun or framing error (溢出或成帧错误)

2

Setting data error （设置数据错误） ・ A value outside the setting range has been set. 设定参数超出规定范围）

3

Format error （格式错误）・ Identification characters other than "S," "R," "W," etc. have been set. （设置了除“ S”，“ R”，“ W”等标识字符以外的字符）・ Regulated command number of commas does not match （规定命令中
逗号的数量不一致）

4

Execution error （执行错误）・ Process execution failure （执行处理失败）(zero set process luminous point abnormality, etc.) （调零处理中光斑异常）5Condition error （状态错误）・ Command outside regulated status received （在规定状态以外的状态下收到命令）

6Timeout error （超时错误）・ LF cannot be received within 1 second of receiving the first command
character（收到命令第一个字符后 1 秒钟内无法接收到 LF）

7

File number in excess error （文件 ・ The maximum number of new files to be saved has been exceeded. （超数量过载错误）过可保存文件的最大数量。）

8

No output data error （无输出数据 ・ Result output command received with no measurement results. （接收到没有测量结果的结果输出命令。）
错误）9

No file name error （无文件名错误） ・ No file name at file saving or readout （保存或加载文件时没有文件名）

10

File name mismatch error （文件名・ No matching file name at file readout （读取文件时没有匹配的文件名）
不匹配误）

2**

・ Among the setting value batch setting command items,
a value outside the setting range has been set
Setting data error （设定数据错误）For item numbers, see the Setting value batch setting command modes(**: Item number 01 to 19)
content（＊＊：项目编号 01～19）（设置值批量设定时，有几处的设置参数超出规定范围关于项目编号，请参阅设定值批处设定命令的各种模式的内容。）

4.5 Remote control （远程控制）
Readout of judgment results and setting content as well as changing of setting content ispossible by sending communication commands from the host device. (可以通过从主机设备发送通信命令，读取判断结果和设置内容并更改设置内容。)(Operates only in remote status upon pressing the remote button on the main screen.
To cancel remote status, hold down the ESC button for at least 4 seconds or send a remote
cancel command.) （当按下主屏幕上的“远程”按钮时，只有远程状态起作用。
要取消远程状态，长按 Esc 键（4 秒钟以上）或发送取消远程连接命令。 )62

Doc. No. SG21-305-001E

5. Other（其他）
5.1 Error display list （错误显示表）
Codes are displayed for errors or warnings generated during measurement or setting.
The main error and warning content is as shown here.Confirm the content and take suitable measures.
（在测量或设置过程中发生错误或警告时会显示代码。显示主要错误和警告内容。 请检查内容并采取措施。
）
StatusError （错误）Warning (警告)CodeMessage

Content

E1

Level Low

Light reception amount decrease error （接收光强过低错误）E2

Level OverLight reception amount excess error （接收光强过高错误）E3

Area Out

Outside luminous point area error （光斑在测量范围外错误）

E5

Input Error

Outside input value range error （输入值在规定范围外）E9

PW Set Error

W2

Level OverLight reception amount excess （接收光强过高）W4Level OverLight reception amount end saturation （接收光边缘饱和）W5

LD HiOutput

LD high output status （LD 高输出状态）LD power automatic adjustment error （LD 功率自动调节错误）63

Doc. No. SG21-305-001E
5.2 Troubleshooting （故障排除）
Phenomenon

Cause

Reference

Countermeasure

page

Power
sourceconnector
is Insert a 24 V power source connector （插入 24V 电源插
disconnected（电源插头被拔）座）
Power source does notturn on （未通电）Power source cable is disconnected
Replace the power source cable （更换电源线）（电源线断线）Connection cable is disconnected（接线被拔出）Correctly connect the cable with the processor power
P.9, 17source OFF （切断处理器电源后，正确接线）Distance to measurement target Keep the distance to the measurement target object
within 92 ±0.1 mm（请将测量物体置于距离在 92±0.1mm object is too long（测量物体距离太远）以内）
Measure the displacement within the measurement
Luminous point pointer is Object measured has displacement range. 在测量位移范围内测量。
not displayed on monitor exceeding the measurement range <Measurement range> （测量范围）（显示屏上未出现光点指 （测量物 体的 位移过大 超出 测量范 ・ Tilt: -5.0 deg to +5.0 deg围）针）
Laser output is low （激光输出太弱）

Adjust laser output with settings menu LPDW （在设置P. 30
菜单 LDPW 中调节激光输出）If laser output fluctuates significantly or does notincrease even with LPDW setting, contact Suruga Seiki.
Laser service life （激光的寿命）(激光输出波动很大，如果即使使用 LDPW 设置，输出也 没有增加，请与我们联系。)
Measurementtargetobject The WA-LAC measurement target is the specularreflectivity is low （被测量物体的反射 reflector.
(WA-LAC 测量的对象是镜面对象)率过低）Adjust laser output with settings menu LPDW （在设置Laser output is low （激光输出太弱） 菜单 LDPW 中调节激光输出）
P. 30
Measurement results are
unstable（测量结果不稳定）Vibration is present （有振动）Confirm that reflectivity and laser output are adequate
and remove any causes of vibration. （确保适当的反射
率和激光输出并去除振动因素）

Ambient diffuse light is present （外 Remove ambient diffuse light around the head（排除传感器头周围的外界光反射）
界光漫反射）-

IN1 to 3 and GND are incorrectly
Connect IN1 to 3 and GND correctly
connected （IN1-3 和 GND 接线不正P. 42
（正确连接 IN1-3 和 GND 的接线）确）Press the remote button on the main menu to shift to（I/O 输入无反应）Processor is not in remote status
remote statusP. 39（处理器未处于远程状态）（主菜单栏中按下 Remote 按钮切换至远程状态）
OUT1, 2 and output common
I/O output is not taking are incorrectly connected
Connect OUT1, 2 and output common correctly
place
P.16,17（OUT1、2 和输出公共端没有正确连 （正确连接 OUT1、2 和输出公共端）（无 I/O 输出）
接）No response to I/O input

Serial cable is not connected（没有连接串行电缆）No
responsecommands（不响应命令）Straight cable is in use
to （使用的是直电缆）Connect serial cable correctly（正确连接串行电缆）P. 17

Use a cross cable（使用交叉电缆）Baud rate mismatch（波特率不匹配）Match the communication speed（请同步通信速度）

Processor is not in remote status（处理器未处于远程状态）Press the remote button on the main menu to shift toremote status
P. 39（主菜单栏中按下 Remote 按钮切换至远程状态）

64

P. 34

Doc. No. SG21-305-001E

5.3 Product external appearance （产品外观图）5.3.1 H920-P500 sensor head external appearance （H920-P500 传感器头外观图）

Fig. 5-3-1. Sensor head external appearance

65Doc. No. SG21-305-001E

5.3.2 H920-P500 processor external appearance （H920-P500 处理器外观图）Fig. 5-3-2. Processor external appearance （处理器外观图）66

Doc. No. SG21-305-001E

6. Warranty and after sales service （质保及售后）● Warranty （关于质保）
Make inquiries using the serial number on the product rear panel surface.
（咨询时，请提供产品背面板上的序列号）
The warranty period is one year from delivery.
（质保期间为收货后一年）
The following situations, however, are out of warranty range; repairs will require fees.
（但是，以下情况无免费维修义务，可进行有偿维修）- Failures or damage due to misuse or to modification or repair not performed by Suruga Seiki
personnel（由于错误使用以及非本公司人员改造及修理引起的故障和损伤）- Removal of the modification prevention seal （防篡改封条被撕毁）- Failures or damage due to unsuitable handling such as dropping during conveyance or transport（因运输或移动过程中掉落等不当操作而导致的故障或损坏）- Failures or damage due to natural or artificial disasters such as fire, salt damage, gas damage,abnormal voltage, earthquakes, lightning, storm damage, etc. （火灾，盐害，气体损坏，异常电压和地震，雷击，风浪和水灾以及其他自然灾害引起的故障和损伤）- Failures or damage due to handling in contravention of the methods and cautions in the instruction
manual（违反说明书上的操作方法及注意事项引起故障或损坏）● After sales service （关于售后服务）
Before making a repair request, check the items on p. 64. （申请维修前请确认 P.64 页的各项目）Contact Suruga Seiki Optical System Division sales personnel if anything is unclear.
（若有疑问，请咨询本公司光学機器事业部售后）<During warranty period> （质保期间内）Failures taking place during normal use in accordance with the cautions in the user's manual will be
repaired free of charge.
For the above failures out of warranty range, repairs will require fees.
（在遵照说明书的注意事项正常使用时发生故障，提供无偿修理服务。若为上述情况引发的事故，则为
有偿修理服务）<When the warranty period has passed> （已过质保期的情况）When functions can be maintained through repair, requests for repair (fees required) will be accepted.
（若通过修理可是持续利用，根据客户要求提供有偿修理服务）● Repair period （关于可修理的期限）
The minimum retention period for performance parts for repair of this product (parts required tomaintain functions) is one year from production end. Repairs are possible within this period. You may
also contact Suruga Seiki Optical System Division sales personnel even after the part retention period
has passed, as repairs are still sometimes possible.
（该产品维修用功能零件（维持功能所必需的零件）的最短保存期限为停产后的一年。 此时间段内可以进行维修。 此外，即使部品已过最低保存期限也有可能进行维修，具体情况请咨询本公司 OST 事业部
售后）*Regarding failures of this product, Suruga Seiki bears no responsibility for anything other than repairs
free of charge based on the warranty.
（除了根据保修提供免费维修外，我们对本产品引起的任何故障概不负责。）

67Doc. No. SG21-305-001E

Inquiries about this product can be made as below.
（相关产品咨询请通过以下联络方式联系）Optical System Division
TEL : 054-344-0332
FAX : 054-346-1196
URL : http://www.surugaseiki.com/
E-mail: info@suruga-g.co.jp
68