DYNAMIC

ACCURACY

THROUGHPUT

Find Your Best Positioning Solution
HIGH-PRECISION MOTION SYSTEMSW W W. P I . W S / L A S E R - F A I R

Always the Right Solution for Your Application
Motion and Positioning Systems from PI

High-precision motion and positioning systems are crucial for successful work in many applications. In optics and photonics, as well as in microscopy, in industrial automation – in theseand many other areas, workpieces and tools move in relation to each other, samples andoptics need to be aligned, or components and glass fibers are assembled permanently or fortest purposes. To enable this, with accuracies down to the nanometer scale, with the required
speed and reliability, this is the specialty of PI.
For this purpose, PI offers a unique, wide, and versatile selection of motion and positioning systems: From individual piezo actuators with a travel range of a few micrometers, through piezo motor-driven positioning stages, tocomplex gantry systems. All of this is complemented by suitable sensor and controller technology. The potential
for the application of the products and solutions from PI is as diverse as the product range itself – fiber positioning
systems for integrated photonic circuits (PIC); assemblies for large-area laser processing, e.g. for drilling and marking
PCBs; hexapods for motion simulation to test image stabilizers; highly dynamic tilting platforms for beam control
in optical assemblies …
In this brochure we have put together a selection of solutions for different applications
which you will be partly able to see live and in motion at our trade fair stands.
Let yourself be inspired and make yourself a picture of the possibilities ofthe motion and positioning systems from PI – and let us know how we
can support you and your application!
We look forward to seeing you.

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CONTENT
Automated Multi-Channel Fiber Array Alignment .............................................. 	4
Study: Fiber Alignment in Two Linear Axes Controlled by ACS ......................... 	5
High-Precision Laser Processing for Wafer Dicing .............................................. 	6
Industrial Laser Material Processing ................................................................... 	7
Large-Area Laser Machining ............................................................................... 	8
High Dynamics Focus Shift for Laser Beam Welding and Cutting ...................... 	9

V-731 High-Precision
XY Linear Motor Stage

Tactile and Optical Testing of Electronic Devices ............................. 	
10
Industrial Optical Inspection ............................................................. 	
11
Motion Simulation for Qualifying Gyroscopes ................................. 	
12
Motion Simulation for Testing Image Stabilization ......................... 	
13
Fast Platform for Mirror Tilting ......................................................... 	
14
Object Positioning in Six Degrees of Freedom ................................. 	
15
Active Shims for Long-Term Stable Positioning .............................. 	
16
Nanopositioning for Microscopy ...................................................... 	
17
Services from PI ................................................................................ 	
18
The PI Group .................................................................................... 	19

H-900KSCO
Hexapod

3

MOTION|POSITIONING

Automated Multi-Channel Fiber Array Alignment
Fast Active Alignment – Simultaneous Positioning in 6 DOF – Custom Degree of Automation

The worldwide appetite for data is growing exponentially, driven by countless applications such as mobile computing, IoT or video
streaming – to name but a few. Photonics-based computing offers significant advantages in terms of lower energy consumption
and faster data transmission. Cost-effective mass production of photonic integrated circuits (PICs) requires precise positioning andhigh alignment speed when it comes to wafer-probing, fiber-chip coupling, and packaging. The setup for multi-channel automatedfiber assembly, based on the proven double-sided F-712.HA2 fiber alignment system and PI’s multi-axis gantry system, offers an
idea for further workflow automation.

Motion Control
Double-Sided Fiber Alignment System F-712.HA2nH-811 Hexapod combined with thenP-616 NanoCube® Nanopositioner for parallel-kinematicnIntegrated scan routines for fiber optic alignmentnFirmware based parallel gradient searchmotion in three degrees of freedomalgorithm includednAutomatic alignment ofPI’s modular hardware and ACS EtherCAT-based
controller architecture allow OEMs to constructreally high performance and safe automationassemblies of arbitrary complexity. Alternatively,
PI’s Engineered Subsystems Group stands readyto assemble and ship custom automation subassemblies like the one demonstrated here –ideal for OEMs preferring to focus on their valueadded.

several fibers / fiber
arrays in <0.5 s

Key Features of the Gantry System for Pick-and-Place

F-712.PM1 Optical Power MeternHigh mechanical stability

Conversion of optical signal intoa voltage signalnHigh dynamic precision positioning in three axesnLinear motors or brushless drives (optionally with air bearings)n	Wide range of designs (drive systems, bearings, encoders …)
and specifications (velocity, acceleration, travel ranges …)

n	

n	

n	

Additional current input
λ: from 400 nm to 1550 nm
Signal bandwidth: 20 kHzn	Precise logarithmical outputn	

Further Applications for the F-712 System Family and the Gantry Concept:

4

SiP / Photonics:
Waferprobing / Fiber-to-chipcoupling / Test and packaging

Laser material processing:
Laser-drilling / -welding /Stencil cutting / Micromachining

Optical industry:
Lens alignment / Laser cavity
tuningSemiconductor:
Wafer- and maskinspection

W W W. P I . W S / L A S E R - F A I R

Study: Fiber Alignmentin Two Linear Axes Controlled by ACSHigh Dynamics – Flexible Design – High Productivity

PI’s optimization technology has proven to dramatically improve production economics in processes as diverse as photonics wafer
probing, device packaging, chip testing, and even laser and optical equipment manufacturing. The combination of blazing speed,
nanoscale performance, and industrial robustness reduces costs and improves yield worldwide. Now the flexible combination ofPI’s industrial stages and new alignment-enabled controls from ACS addresses additional tough throughput and yield challenges
for photonics production.

The Study Integrates:
PI XY ultra-precision linear motor stage

This conceptual demo shows how PI’s fast alignment canapply to large-area applications such as pick-and-place, andthe screening, assembling, and testing of photonic devices.
From the wafer, through coupon and chip, to the packaged
product. The system performs a rapid localization, scanning,
and fast lock-on and tracking of a series of photonic components over a large area.

n	PI F-712.PM1 high-bandwidth,
broad-spectrum optical power metern	

ACS controls with PI’s alignment firmwaren	This opens new possibilities for hyper-efficient systems
architectures in large-format production processes. PI’sunique optimization functionality is firmware-based, offers
parallel alignment across multiple inputs, outputs, anddegrees-of-freedom, and can improve process throughput
by a factor of 100 or more compared to legacy approaches.

Motion Control

V-508 PIMag® Precision Linear Stage

PI’s modular V-508 PIMag linear stages are ideal for the demanding
manufacturing and testing of photonic devices. PI’s fifth-generation
fast alignment technology combined with the open-architecture
modular controls from ACS enables the flexible construction ofsophisticated systems, providing extraordinary performance withadvanced safety provisions. These functionalities provide especially
rapid throughput with seamless compatibility with today’s photonic
devices, which often prove challenging for legacy technologies.
®

Travel ranges from 80 mm to 170 mm
and 250 mmn	nHigh velocity with up to 0.6 m/snAcceleration up to 5 m/s²nCrossed roller guides for high load capacitynCompact cross section: 80 mm × 25 mm

Further Applications for the V-508 Precision Linear Stages:
Semiconductor technology:
Positioning of stages for wafer andmask metrology
Industrial automation:
Precision positioning of stages in many
applications, e.g. laser material processing

MOTION

5|

POSITIONING

High-Precision Laser Processing for Wafer Dicing
High Guiding Accuracy – Exceptional Velocity Control – High Repeatability

Manufacturing chips and microchips involves cutting the wafers, using a process known as wafer dicing, into small squares orrectangular “chips” or “dice”. Typical challenges to consider in wafer dicing applications are: To position the cut accurately, tominimize the losses of material, and to minimize distortions of the components. While at the same time, the maximum possible
machining speed must be achieved. As the requirements are constantly increasing, laser dicing has become the preferred dicing
technology. This noncontact laser process is flexible and avoids flaking at the cutting edges. The good quality of the edges, which
is one of the decisive factors for fracture resistance, can be further improved with various automated finishing processes. Thissignificantly reduces production waste and, therefore, saves production costs. Accordingly, laser dicing processes also demand
motion systems that offer high accuracy and high straightness at high velocities.

Rotation Axis – Wafer Orientation
and CorrectionnAir bearing rotation stagen

Direct-drive cogless motion

Key Features of the Motion SolutionnDirect-drive linear and rotation stages
with air bearings for ultimate precision

Superior travel accuracy, flatness,
and wobble performancen	nHigh straightness, flatness, and repeatabilitynElimination of cogging for smooth velocity
controlHigh stiffness and load capacitynDrag chain cable management

Cleanroom compatiblenMetrology provided at wafer work pointn24/7 operation with high duty cyclesnAbsolute encoders eliminate referencing

n	
n	

>> A-623 PIglide rotation
stage with air bearings

while increasing efficiency and safety
during operation

Motion Control
nScan Axis

High performance EtherCAT® motion controller presented in a 19”-n	rack with integrated drives, power supplies, and functional safetyn	>> A-814 PIglide motion controller

XY planar air bearing stage
High velocities and accelerations
Excellent geometric performancen	

NanoPWM™ drive technology enables nanometer tracking error
and optimal velocityn	>> NanoPWM™ Drive

Resolution to 1 nmn	

Low profile for limited installation spacen	Cleanroom compatiblen	Advanced servo control algorithms such as>> A-311 PIglide planar scanner with air bearingn	>> ServoBoost™

Further Industries and Applications That Benefit from the Motion Solution:6

Laser material processing:
Ultra-fast laser ablation

Semiconductor:
Wafer scribing and singulation –Wafer inspection – Defectdetection

Electronics manufacturing:
DCB (Direct Copper Bonded)circuit board scribing

Medical:DNA luminance testing – Device
manufacturing

W W W. P I . W S / L A S E R - F A I R

Additive manufacturing:
Twin photon polymerization

Industrial Laser Material Processing
Small Geometries – High Dynamics – Debris Protection

Machining platforms for creating tiny geometries in the micron range demand motion systems that provide a consistent, accurate
and dynamic processing in multiple dimensions. As the size and mass of the manufactured parts may be challenging and particles
may be formed during machining, the system components used need to be highly precise, stiff, robust and offer reliable performance.

Key Features of the StagesnLaser PositioningReference edge to support the alignment in themachinennConnector for purge air to create overpressureSide seal and hard cover to protect against
particlesnnSynchronous servo motornHeavy-duty recirculating ball bearingsnHolding brakenAbility to run directly on 110/240 volt AC
Image: Shutterstock

>> L-417 high-load linear stage

Robust industrial IP65 connectors for flexible
cable exitn

Easy access to the lubrication systemnDifferent encoder variants including absolutemeasuring sensors offering nanometer
resolutionnDifferent stage widths fordifferent loads and cantileverreduction

Workpiece Positioning

Motion Controlnn CS SPiiPlus EtherCAT® network motion controllersAand drive modules for optimum synchronization of the axes
and simultaneous control of the laser

Ironless magnetic direct drive linear motorsn	 he Laser Control Module (LCM) can control a laser source directlyTwith full synchronization to the motion path. LCM is able to interface with a wide range of lasers such as DPSS, CO2, excimer, fiber,
Q-switched, picosecond, or femtosecond. It is also suitable forposition based triggering applications for test and inspection tasksnHeavy-duty recirculating ball bearingsn

XY configuration without adapter platen

XY drag chain cable management>> V-417 high-load linear motor stage>> Laser control module

Further Industries and Applications That Benefit from the Motion Solution:
Laser material processing:
Drilling – Welding

Automotive:
Fascia machining – Surface structuring –Additive manufacturing – Testing andinspection

Electronics manufacturing:
PCB Drilling – Inspection –Component placement

Medical:Hermetic seam welding – Tissue
engineering – Inspection – Metrology

MOTION|POSITIONING

7

Large-Area Laser Machining
High Precision – High Throughput – Simultaneous 2-D Processing

PI offers an advanced solution to process surfaces that extend the field of view of a galvanometer scanner while maintaining
resolution and spot size. The solution combines PI’s high-precision motion systems, ACS’s high-performance motion controller anddrives, and SCANLAB’s leading scanner technology. The XL SCAN method provides simultaneous and coordinated control of
the workpiece motion system, the scanner and the laser. The control software of XL SCAN automatically splits the desired
pattern trajectory into a path for the scanner, a path for the XY stages and the control for the laser spot. The scanner receives highfrequency motion signals for short distances. The positioning stages with long travel ranges get low frequencies and enlarge theworking area. XL SCAN significantly improves throughput and precision in applications such as PCB drilling and large-scale laser
marking. The shortened process times lead to higher productivity and lower production costs.

Features of the XL SCAN Automation
SolutionnExtended process arean

Increased throughput

n

n

n

n

Laser Beam Steeringnscan system from SCANLAB
with an XY galvanometer scannerfor beam control

Increased processing accuracy to themicron level mooth processing with highS
dynamics and no stage vibrations>> excelliSCAN scan head utomatic laser control,Ae.g. Spot Distance Control(SDC) ultiple scan heads andMworkpiece motion systems
capability

Automation Control

Workpiece Positioning

Motion control solution jointly-developed by SCANLAB andACS Motion Control which integrates a digital scanner tech­nology
using EtherCAT®-based industrial networking

 Y linear motor stages or planar scanners
Xfor high geometric characteristics and highvelocitiesn	n>> SPiiPlus EtherCAT® motion controller and universal drive module>> V-731 high-precision XY linear motor stagenSynchronization of galvo and stage motion controller achieved throughn>> SLEC SL2-100 to EtherCAT interface®

n ystem control software which integrates the control of motion,S
scanner and laser at the process leveln>> SPiiPlusSPC + >> syncAXIS control software

Further Industries and Applications That Benefit from the XL SCAN Solution:
Laser material processing:Micro drilling – Glass cutting –Marking8

Fast and precise excelliSCANElectronics manufacturing:
PCB drilling – PCB depaneling –Display cutting

Automotive:
Surface texturing

Medical:Tube processing

W W W. P I . W S / L A S E R - F A I R

 ptional granite support for high accuracyOand stability
 lternative gantry arrangement withA
stationary workpiece and moving scanheadHigh Dynamics Focus Shiftfor Laser Beam Welding and CuttingHigh Process Speed and Quality Through Controlled Energy Distribution

Lasers are used today in a wide variety of industrial applications in order to optimize production processes and guarantee highworkpiece quality. Laser machining processes can as well be significantly improved by high-frequency oscillation of the laser beamin the XY plane. Increasing requirements in industry, however, demand not only a fast motion in the plane, but also a fast active
vertical shift of the beam energy in the workpiece, e.g. to further increase the usable feed rate during laser beam cutting of thicksheet metal or to enable better weld seam quality and process stability during laser beam welding. As part of the PISTOL3 project,
PI developed a piezo-based, high-dynamics Z axis focus shifter module in cooperation with the Fraunhofer IOF, the Fraunhofer IWS,
and the industry partners Kjellberg Finsterwalde, Heliatek and Optics Balzers. With this module, it is possible to extend conventional
methods and also 2-D beam manipulation in the XY machining plane by a highly dynamic movement in the direction of the beamaxis or Z axis, thereby increasing the machining speed and improving the machining quality.

PreliminaryTechnical Data of the Prototype
Image: Shutterstock

Benefits of the High Dynamics Z Axis Focus Shifter ModulennFaster process speed through controlled energyndistribution in the workpiecen	

A travel range of 28 μm achieves a mean
shift of the focal plane, for example,
by 15 mm with an appropriate optical setup

Influence of the melt pool dynamics by highly dynamic
oscillation of the focus positionnCompact design for easy integration

Versatile application possibilities due tovariable module and optic designn	

into existing laser processing headsnDrive frequency to 2 kHz

High reliability due to wear-freeguides and actuator technology
as well as process-relevanttemperature managementnHigh economic efficiency
through process optimization
with low implementation effort

Focus shifter module inuse for high-dynamics
laser cutting with 3 kW
laser power

Features of the Z Axis Focus Shifter Modulenn iezo-based aspheric membrane deformationP
to avoid imaging errors
 lliptical mirror substrate for maximum beamEaperture exhaustionnDielectric coating for high reflectivitynUse of >> PICA Thru© ring actuators
Trade fair demonstrator
incl. focus shifter module

Further Applications of the Z Axis Focus Shifter Module:
Laser beam
welding

Laser beam
drilling

Laser beam
cutting

Laser beam
structuring

SPONSORED BY THE

MOTION|The PISTOL3 project is part of the“Zwanzig20-Partnerschaft für Innovation”
funding program that is supported by theGerman Federal Ministry of Education
and Research, the Bundesministerium für
Bildung und Forschung (BMBF).

POSITIONING

9

Tactile and Optical Testing of Electronic Devices
High Repeatability – Force Control – Various Angles

Electronic systems are becoming smaller, more complex, operate in different environments and include several types of devices that
require tactile, optical, and electronic testing methods. The position of these devices in the final assembly demands precise positioningof the inspection tool in several degrees of freedom. PI offers high-performance motion systems for various test methods that can be
integrated into customer production lines while maintaining capacity and throughput.

Key Features of PI’s Motion SystemsnPositioning of Testing Device

Unique range of motion technologies to design
most advanced solutionsnIndustrial high-performance motion control
platform provides coordinated motion of all axes
for maximum throughput
Easy connection and management of third party
sensors and test devices with flexible EtherCAT®
connectivityn	Can be integrated as a subsystem under most
PLCs and automation controllersn	nBall screw linear motor or voice coil stagen

Cable management integrationnHolding brake or counterbalancenDirect-measuring linear encoder>> M-511 high-precision linear stage
Sensor Positioning at Various AnglesnParallel-kinematic hexapodn

Six degrees of freedomnFreely definable center of rotation>> H-811 6-axis miniature hexapod

Force Control of Measuring
Sensorn

PIMag® voice coil linearnForce sensor withactuator
1 mN resolution>> V-275 PIMag® voicecoil linear actuator
Automation Control

Workpiece Positioning

ACS SPiiPlus EtherCAT-based motion control platform operates
as an independent machine controller or as a subsystem undermost PLCs and automation controllersnMotion Controller >> SPiiPlusESn

Universal Servo Drives >> NPMpm

nMagnetic direct drive linear motors forhigh precision and high velocitiesn

Absolute encoder with 1 nm resolutionn

XY drag chain cable management>> V-551 precision linear motor stage

Further Industries and Applications That Benefit from This Stage and Motion Control Concept:

10

Electronics manufacturing:
Fingerprint and pressure
sensor testing – Camera lensalignment – Haptic tests

Automotive:
Testing of inclination, velocity, and acceleration sensors – Lens alignment – Injection
nozzle inspection – Haptic tests for car keys

Semiconductor:
X-ray and computed
tomography inspection

Medical:Surface profiling of spherical andaspheric lenses – Needle inspection

W W W. P I . W S / L A S E R - F A I R

Laser material processing:
Hermetic seam welding –Surface texturing

Industrial Optical Inspection
Flexible Configuration – Fast Step-and-Settle – Nanometer Resolution

Optical inspection is an essential process in industrial quality assurance. Optical inspection systems, which are used in industrial
environments, should provide reliable and repeatable measurement results and enable high throughput rates. This also applies tothe movement of the workpiece, specimen or test specimen, and to the positioning of the imaging optics. The positioning systems
used must be flexible in order to move both the sample in the plane along different travel ranges and the optical components in thevertical direction.
Positioning of the Imaging Optics
High scanning speed and fast step-andsettle due to magnetic plunger coil drive

Key Features of the Positioning SolutionnFlexible configurationnHigh repeatability and nanometer precisionnHigh-resolution position sensors

nMeasuring using auto-focus algorithms

nFocusing on different focal planesn	Adjustable weight compensation for
flexible lens massesn	High-resolution, direct-measuring
position sensorsn	Flexible adaptation of drive force anddimensions due to PIMag® voice coilmotorsn	Flexible adaptation to the required performance
characteristics through PIMag® motorsn	

Easy integration into the automation
environment via industrial
EtherCAT® interfacen	

Motion Control

Sample Positioning
High scanning speeds due to magnetic linear motors

Optional industrial EtherCAT® interface

n	

n	

Serial axis combinations for flexibly configurable
travel ranges on the sample level or integrated XY
stages for space-saving design

Digital control with optimized control
algorithms for constant scanning speed,high repeatability, and fast step-and-settle

n	

n

n	

High-resolution, direct-measuring position sensorsn	

Fast sensor signal processing for simultaneous high speeds with high resolution

Flexible adaptation of drive force and dimensions
due to PIMag® linear motors

n	

n	

Optional analog inputs for external
control signals>> V-508 PIMag® precision linear stage

Further Industries and Applications That Benefit from the Motion Solution:
Biomedical
engineering

Laser material
processing

Electronics
manufacturing

Flat-panel
production

Microstructuretechnology

11
Semiconductor

MOTION

Microscopy|

POSITIONING

Motion Simulation for Qualifying Gyroscopes
Multiple Degrees of Freedom – Highly Dynamic Following of Predefined Trajectories

Gyroscopic instruments or gyroscopes can detect and measure a rotary motion or acceleration of the external reference system in
relation to the rotating mass. For example, built into theodolites they are used for precise measurements in geodesy, mining, or
geology. Due to their properties, gyroscopes are also used for active attitude control in aerospace and marine applications. The
ISS space station, for example, uses the gyrocompass to determine its position in space. Even many smartphones have a built-in
gyrocompass for navigation and location. In order to qualify gyrocompasses, real conditions such as ship movements must be
simulated. ISO standards exist that describe the motion profiles and performance requirements in detail for these test procedures.
The combination of reaching a target position with a certain precision and the translational and rotational movements (roll, pitch,yaw) is a challenging task that can be performed by specifically designed hexapods.

Key Features of HexapodsnThree linear axes,

MotionSimulation
Applications Benefit from:
Image:
Shutterstock

three rotational axesnHigh stiffnessnExcellent dynamic behavior,nFreely definable center of rotationnfast step-and-settlenExcellent repeatabilitynNo cable management

Multiple degrees of freedomn	Tracking of predefined trajectories
Motion frequencies to 50 Hz*n	

CIPA certification*n	>> Image shows the H-900KSCO hexapod

at the motion platform
required* depending on the hexapod used

Motion ControlnEasy commanding of target positions in Cartesian coordinatesnCoordinate transformation for parallel kinematics is handled by the controllernReference system (work, tool) can be quickly and easily changednDefinition of sine curves and/or arbitrary trajectoriesnSupport of motor brakes and absolute-measuring sensors with BiSS interfacenAnalog input availablen

Easy integration in automation processes via industrial EtherCAT® interface

>> C-887.53x hexapod motion controller with EtherCAT®

Further Industries and Applications That Benefit from Motion Simulation with Hexapods:
Ship and marine technology:
Gyrocompass testing according toISO 20672, ISO 8728, and ISO 16328

12

Quality assurance:
Testing of image stabilization systemsof cameras – Testing of gyroscopic sensorsof smartphones

Automotive:
Testing of vibration resistance – Testingof cameras for driver assistance systems

W W W. P I . W S / L A S E R - F A I R

Motion Simulation for Testing Image Stabilization
High Repeatability – High Dynamics – High Path Accuracy

Taking sharp pictures despite poor lighting conditions, taking snapshots without blurring, recognizing traffic signs or road markingsin driver assistance systems, or identifying dangerous situations in surveillance systems – all of this is possible today with the helpof modern cameras. But how good is the still and video image quality of a camera or smartphone? End users, manufacturers fromcompanies in the aerospace, medical and security, or the automation technology sectors – they all place high demands on theperformance capabilities and look for answers to these questions. Companies dealing with these issues rely on test equipment thatguarantees reliable and comparable test results. In order to test the image stabilization systems of cameras, for example, thefrequencies and axis movements must be simulated realistically and they must be identical for each test.

Motion Simulation Applications Benefit from:Key Features of the HexapodnMultiple degrees of freedomn	Three linear axes, three rotational

Freely definable center of rotation according
to the position of the image stabilization
component in the camera

n	

axes
n

High stiffnessnExcellent dynamic behavior,

Excellent dynamic behaviorn	fast step-and-settlennTracking of predefined trajectoriesn	Excellent repeatability

Motion frequencies to 50 Hz*n	No cable management at the

CIPA certification*n	motion platform required>> Image shows the H-840 hexapod* depending on the hexapod used

Motion Control

CIPA Certification

Position input via Cartesian coordinatesn	Coordinate transformation handled by the controllern	Reference system (work, tool) can be quickly and easily changedn	Definition of sine curves and/or arbitrary trajectoriesn	Support of motor brakes and absolute-measuring sensors with
BiSS interfacen	

Analog input availablen	The lobby association of the Japanese photographic industry Camera & Imaging Products
Association (CIPA) sets standards for motion
systems that are used in test equipment for image
stabilization. Hexapods from PI are the only sixaxis positioning system for the simulation ofcamera shake that fulfill the requirements of the
CIPA standard.

Easy integration in automation processes via industrial EtherCAT®
interfacen	>> C-887 hexapod controller with EtherCAT®

Further Industries and Applications That Benefit from Motion Simulation with Hexapods:
Cameramanufacturer

Aerospace

Security

13
Automotive

MedicalMachine vision

MOTION|POSITIONINGFast Platform for Mirror Tilting
Short Settling Time – High Dynamic Linearity – Parallel-Kinematic Design

Dynamically adjustable mirrors play an important role in countless optical structures. Examples are image processing andstabilization, optical filters and switches, optical traps, laser tuning, and many more. The S-355 tip/tilt platform is versatile in use
thanks to its parallel-kinematic, multi-axis design and its flexure guides, which are free of maintenance, friction, and wear. It allows
fast, high-dynamics motion with high precision.

E-727.xF Digital Multi-Channel Piezo
Controller with Ethercat® Fieldbus Interface

Key Features of the S-335 Tip/Tilt Platformnnn

Tip/tilt angle to ±17.5 mrad ➔ high optical deflection anglenSimultaneous control of up to 3 axes

to 70 mrad (4°)

n

20 kHz sampling rate for control

Parallel-kinematic design: Two orthogonal rotational axesn

100 kHz sample rate for sensor readingwith one common center of rotationn	

ID chip support for automatic calibrationof the controller to the piezo mechanics(fast startup and interchangeability ofsystem components)

High resonant frequencies from 2 kHz (unloaded) to 0.7 kHz(loaded with 1 inch mirror) for dynamic motion and fast
step-and-settlenIntegrated strain sensors for high linearity

Light Coupling in Fiber MatrixnHigh-precision beam control for couplingof laser light in individual glass fibers forthe generation of dot graphics with thehighest demands on precision and speed

Range of Applications for Tip/Tilt Platforms:

14

Optical industry:
Pointing applications with highest
demands on linearity and point-to-point
accuracy / optical trap / image stabilization

Semiconductor technology:
Beam steering during wafer and mask
inspection, lithography

Microscopy:
Multicolor applications

SiP / Photonics:
Alignment and assembly processes

W W W. P I . W S / L A S E R - F A I R

Object Positioning in Six Degrees of Freedom
Parallel-Kinematic Design – Travel Range to 500 µm / 1.5° – Nanometer Precision

Performing object movements in all six degrees of freedom is necessary in many applications. For example, the alignment of lenses
in complex optical systems (e.g., smartphone cameras) or the positioning of optical fibers on silicon photonic components. New
active alignment applications place higher demands on the positioning accuracy. Tolerances are not only limited to the threespatial directions, the angle accuracy comes into focus and so angle scans become necessary, for example. The compact, parallelkinematic P-616KLTS NanoCube® serves all six degrees of freedom and opens up many new possibilities for the assembly andadjustment of demanding structures.
Positioning of Lenses in Six Degrees
of Freedom

Key Features of the P-616KLTS NanoCube®
n

500 µm travel range in X, Y, and Zn

Tip/tilt angle to 1.5° in θX, θY, θZnAny pivot pointnThe requirements for camera systems insmartphones are continuously increasing. In
addition to higher resolution, users expect atrue optical zoom, sharp and distortion-free
images, image stabilization, and much more.
In order to meet these requirements, the individual elements of a lens must be alignedwith high precision along the optical axis
and with respect to each other. With the new
P-616KLTS NanoCube® with six degrees of
freedom, completely new alignment strategies become possible to meet these requirements.

Complete parallel-kinematic designn	

E-712 Digital Piezo ControllernModular digital controller for multi-axis
piezo nanopositioning systems

Range of Applications:
Optical industry:
Precision positioning of optical elements(lenses, gratings, plates ...) in six degrees
of freedom
SiP / Photonics:
Fibre positioning / wafer probing /chip test / test and packaging

15

MOTION|POSITIONING

Active Shims for Long-Term Stable Positioning
Nanometer Precision – High Load Capacity – Long-Term Stability

If a dimension between two components or subsystems inside precision machines or in complex test assemblies changes,
readjustment may often be necessary. PIRest active shims, the piezo-based “washers”, offer a simple solution for it. Once they
have been installed in the machine, the distance between two components or machine parts can be readjusted with their help andwithout any further assembly as often as required and with nanometer precision. These PIRest actuators have a high load capacity
and they are long-term stable. This helps to reduce the installation time of high-precision machines and optical assemblies
and it also reduces downtime, particularly in difficult to reach places (in vacuum chambers or inside machines). If active shims are
already designed into the machine during initial construction, it already helps to save time and costs during the first adjustment.

Key Features of the PIRest ActuatorsnNanometer resolution, micrometer displacement
A permanent voltage supply is not required
to maintain the positionn	nLong-term position stabilitynLoad capacity up to 4000 N per actuatornFlexible shapes and dimensions
Can be combined with classical piezo actuatorsfor static error correction in dynamic processesn	

E-135 PIRest Drive Electronics

Demonstration of Long-Term Stable
Positioning with PIrest ActuatorsnControl of up to 6 PIRest active shimsnID chip detection for automaticnReversible adjustment

configuration of operating parametersnDifferent incremental motion

Independent adaptation ofnAllows expansion and contraction

operating parameters to theambient conditionsnLong-term position stability withoutnpermanent voltage

Range of Applications for PIRest Actuators:

16

Semiconductor technology:
Adjustment of machine parts or
optical components in wafer
scanners / wafer probes

Beamline (e.g., synchrotron):Long-term stable alignmentof complex experimental setups

Mechanical engineering:
Alignment of machine bed, motors,
axes, and other machine elements

Optical industry:Long-term stable precision alignment of single lenses in the system

W W W. P I . W S / L A S E R - F A I R

Nanopositioning for Microscopy
Fast – Compact – To the Nanometer

Precision Positioning is the key element in all types of microscopy. High resolution microscopy must be capable of accurate andreproducible positioning of imaging elements and samples. Requirements range from z-focus positioning of the objective to coarse
and fine positioning of the sample in X, Y and Z-direction as well as often in θX and θY direction and sometimes even in θZ. PI meetsthese requirements with a broad product portfolio for inverse microscope systems of all major manufacturers.

Coarse and Fine Positioning Sample StagesnU-780 PILine® XY Stage System with Controller and JoysticknLarge selection of fine positioning stages for positioning– High-resolution piezo linear driveof samples (sample holders) in the nanometer range– Self-locking at rest, low noise– Positioning with (sub-)nanometer precision in one (Z)direction or in many DOFs; depending on the modeland requirements– Highest stability due to low thermal load and no
lubricants– Wide variety of travel ranges and speed	– Large dynamics range of 10 µm/s to 120 mm/s	– Travel range to 135 mm × 85 mm– Compatible with a wide range of sample holders

Focusing and Z-Stack Scanning with
Nanometer Precision: PIFOC® Objective Scanners
With a wide range of PIFOC® lens scanners, PI provides
the ability to do just the experiment / sample analysis
you want to perform.

n	

Latest developments comprise the newly designed
PIFOC® P-725.1CDE2 with improved settling times.

n	Applications for the Sample Positioning Stages:

Further Applications for the PIFOC Scanner:

Microscopy:
Super Resolution Microscopy
3-D Surface Inspection
Digital Slide Scanning
SEM/AFMElectronics Manufacturing:
Screening
Autofocus Systems
Surface Analysis
Metrology

MOTION|POSITIONING

17

Services from PI
Support Services – Extended Warranty – PI Express Service

PI is dedicated to supporting its customers right from the initial consultation through to when a customer has purchased a PI system.
Beyond that, PI’s services division is committed to ensuring that every aspect of owning a PI system is catered for. Supported byfour Global Service Hubs in Asia, China, Europe and USA, with field product specialists working from these hubs, PI is able to support all technologies and customer applications via this global services team. PI has different service types in addition to the standard
service offered today. The services are described below and can be tailored to each customer’s specific needs.

Standard
SupportExtendedWarranty

ExtendedWarranty
PLUS

PI Express

PI Express
PLUS(Parts and Labour cover for
manufacturing defects)

ü

ü

ü

ü

ü

Access to PI’s Service Support Desk

Regional Support
For 2 Years

Regional Support
For up to 5 Years

Regional Support
For 3 Years

Regional Support
For up to 5 Years

Regional Support
For up to 5 Yearsüü

Optional

Optionalü

Optional

Optional

ü

ü

ü

ü

24 Months Warranty(TRT = Target Response Time)
Standard Working Hours
8:00 –16:00

TRT <12 working
hours

TRT <12 working
hours

TRT <12 working
hours

TRT < 4 working
hours

TRT < 4 working
hours

Extended Warranty(Parts and Labour costs covered
for manufacturing defects –1, 2 or 3 additional years)

Extended Warranty PLUS

(Extended warranty, plus coverfor replacement parts that faildue to normal Wear and Tear.*)

Extended Hours Support(Access to PI’s Global Support teamproviding ad hoc planned out ofhours support services)

Highest Priority Remote &On-Site** Support
Spares Holding(Dedicated holding of spare parts/
systems to minimise unscheduled
downtime)üStandard Support
This is the service level that all customers receive today. PI will respond to any customer’s support request whether inside or outsideof a valid warranty period. PI’s remote support service is free of charge and while products are under warranty, customers benefit
from a 12 working hour target response time, from the initial customer contact.
Extended Warranty
PI’s Extended Warranty delivers wrap around protection for customers with the option to extend the product warranty cover period
for up to 5 years. Extended Warranty can provide cost protection from any latent defects, service level response times for supportenquiries and priority service for warranty repairs and fault analysis.
PI Express Service
PI’s express subscription is the highest priority support service. If a customer experiences a product failure, PI will provide express
remote support, express on-site response if required and can also ship out a dedicated spare system, to get the customer operational
again as quickly as possible.
>> More information about PI services at www.pi.ws/service*	A normal wear and tear failure is defined as damaged that has been caused due to ordinary use. Wear and tear failures that are excluded for non-ordinary use might bewhere the system has been exposed to radiation; liquid or third party abrasive particles have entered the mechanics; the application or operation is beyond the statedcapacity of the system (orientation, load, travel limits, environment); or where user error or an external force has been applied that caused the failure. Maximum 2 claims
over the 3 year term.

18** All on-site services are chargeable in advance at the on-site rate depending on customer location.

W W W. P I . W S / L A S E R - F A I R

The PI GroupA Strong Partner for Industry and Research

PI (Physik Instrumente) has been one of the leading players in the
global market for precision positioning technology for many years.
The technological diversity of the PI Group is unique all over theworld. PI develops, manufactures, and qualifies all its core technologies itself. PI is therefore not dependent on components available
on the market to offer its customers the most advanced solutions.
The complete control over vertically linked manufacturing processes
allows flexible reaction to market developments and new requirements.
Modern organizational forms such as the fractal production model
guarantee efficient production for batch sizes of 1, small series, andalso OEM products in large quantities. By acquiring the majority
shares in ACS Motion Control, a worldwide leading developer andmanufacturer of modular motion controllers for multi-axis drive
systems, PI can also offer solutions from one single source to meetthe industry‘s increasing demands on precision and throughput.

Core TechnologiesnIn-house manufacturing of piezo components andpiezo actuatorsnMagnetic direct drives: linear motors and voice coilsnAir bearings, magnetic and flexure guidesnComprehensive range of piezo motor technologiesnNanometrology sensorsn arallel-kinematic systems for positioning in six axes
P
(Hexapods)nMotion control technologynSoftware

The foremost priority for PI is to be a reliable and highly qualified
partner for the customer.

19

MOTION|POSITIONING|POSITIONING

Headquarters

ACS Motion Control

PI Subsidiaries

GERMANYISRAELUSA (East) & CANADA

USA (West) & MEXICO

Physik Instrumente (PI)GmbH & Co. KG
Auf der Roemerstrasse 176228 Karlsruhe
Phone +49 721 4846-0
Fax+49 721 4846-1019
info@pi.ws
www.pi.ws

ACS Motion Control Ltd.
Ramat Gabriel Industrial Park
1 Hataasia St.
Migdal HaEmek, 2307037
POB 984
Phone +972-4-6546440
Fax+972-4-6546443
info@acsmotioncontrol.com
www.acsmotioncontrol.com

PI (Physik Instrumente) L.P.
Auburn, MA 01501
www.pi-usa.us

PI (Physik Instrumente) L.P.
Irvine, CA 92620
www.pi-usa.us

PI miCos GmbH
Freiburger Strasse 30
79427 Eschbach
Phone +49 7634 5057-0
Fax+49 7634 5057-99
info@pimicos.com
www.pi.ws
PI Ceramic GmbH
Lindenstrasse
07589 Lederhose
Phone +49 36604 882-0
Fax+49 36604 882-4109
info@piceramic.com
www.piceramic.com

USA (San Francisco Bay Area)

UK & IRELAND

PI (Physik Instrumente) L.P.
Sausalito, CA 94965
www.pi-usa.us

PI (Physik Instrumente) Ltd.
Cranfield, Bedford
www.physikinstrumente.co.uk

ITALY

NETHERLANDS

Physik Instrumente (PI) S. r. l.
Bressowww.pionline.it

PI Benelux B.V.
Sint-Oedenrode
www.pi.ws/benelux

FRANCESPAIN

PI France SAS
Aix-en-Provence
www.pi.ws

Micos Iberia S.L.
Vilanova i la Geltrú
www.pimicos.es

JAPAN
PI Japan Co., Ltd.
Tokyo
www.pi-japan.jp

PI Japan Co., Ltd.
Osaka
www.pi-japan.jp

CHINA© Physik Instrumente (PI) GmbH & Co. KG
All contents, including texts, graphics, data etc., as well as their layout,
are subject to copyright and other protective laws. Any copying, modification or redistribution in whole or in parts is subject to a written
permission of PI.
Although the information in this document has been compiled withthe greatest care, errors cannot be ruled out completely. Therefore,
we cannot guarantee for the information being complete, correct and
up to date. Illustrations may differ from the original and are notbinding. PI reserves the right to supplement or change the information
provided without prior notice.

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W W W. P I . W S / L A S E R - F A I R

BRO71E LASER Exhibits 06/2019 1.5. Subject to change without notice. © Physik Instrumente (PI) GmbH & Co. KG 2019

MOTION