Proceedings of the 2nd Annual Meeting of Particle Accelerator Society of Japanand the 30th Linear Accelerator Meeting in Japan (July 20 - 22, 2005, Tosu Japan)

DEVELOPMENT OF FIELD-EMISSION ELECTRON GUN FROM CARBON
NANOTUBES (2)†Yasufumi Hozumi
School of High Energy Accelerator Science, The Graduate University for Advanced Studies (GUAS/AS),
Satoshi Ohsawa, Takashi Sugimura, Mitsuo Ikeda
Accelerator Laboratory, High Energy Accelerator Research Organization (KEK)
1-1 Oho, Tsukuba, 305-0801, JapanAbstract

We have been developing a high brightness electron gun utilizing carbon nanotube (CNT) cathode since 2001.
Recently we succeeded to achieve a realistic-size cold cathode which could stand comparison with current
densities of dispenser cathodes conventionally used in accelerators all over the world. The anode current was
obtained to 0.48 A from the CNT-cathode of 2.6 mm diameter, which current density reduced from the anodecurrent was about 9.1 A/cm2 under a condition of 128 kV-DC acceleration voltage in pulse operations of 50 pps
using about 8 ns pulses. The emission current was very stable in the long-term-period operation for about 3 weeksunder about 10-6 Pa vacuum pressure.

ࠞ࡯ࡏࡦ࠽ࡁ࠴ࡘ࡯ࡉ಄㒶ᭂࠍᜬߟ㔚⇇᡼಴㔚ሶ㌂ߩ㐿⊒㧔2㧕ߐࠇߚ‫ޔߚ߹ޕ‬㔚⇇᡼಴㗼ᓸ㏜ᴺ㧔FEM㧕߿㔚⇇ࠗࠝࡦ㗼ᓸ㏜ᴺ㧔FIM㧕ࠍ↪޿ߚ CNT Tip ᭴ㅧߣ㔚ᚒ‫ߪޘ‬ᤓᐕߩ࡝࠾ࠕ࠶ࠢᛛⴚ⎇ⓥળߦ߅޿ߡ‫ޔ‬᏷ሶ᡼಴․ᕈߣߦ㑐ߔࠆ⺞ᩏ߽♖ജ⊛ߦⴕࠊࠇߡ߈ߡ
65 ns‫➅ޔ‬㄰ߒᢙ 50 pps ߩࠣ࡝࠶࠼ࡄ࡞ࠬ‫ޔ‬෸߮ࠣ߅ࠅ‫ޔ‬CNTࠛࡒ࠶࠲ߦ㑐ߒߡℂ⸃߇ㅴࠎߢ߈ߚ‫ޕ‬࡝࠶࠼㧙ࠕࡁ࡯࠼㑆ߩടㅦ㔚࿶ 100 kV ࠍ↪޿ߡߎ߁ߒߚ⢛᥊߇޽ࠅ‫ޔ‬ᚒ‫߇࠲࡯ࡅߪޘ‬ਇⷐߢ਌ߟ
ࡆ࡯ࡓ⹜㛎ࠍⴕߞߚ⚿ᨐ‫ࡦ࡯࡝ࠢࠬޔ‬ශ೚ᴺߦࠃߞ
ࠞ࠰࡯࠼ߩዊ㕙Ⓧൻ߇࿑ࠇࠆ CNT ಄㒶ᭂࠍ↪޿ߚߡᚑ⤑ߐࠇߚ 6 mmI ߩ CNT ࠞ࠰࡯࠼ߩ㔚ᵹኒᐲടㅦེ↪ࠣ࡝࠶࠼࠼࡜ࠗࡉ㔚ሶ㌂ߩ⹜૞ࠍ 2001 ᐕࠍ 0.4 A/cm2 ߣႎ๔ߒߚ[1]‫ޕ‬ᐲࠃࠅ㐿ᆎߒ‫⎇ᧄޔ‬ⓥળ╬ߦ߅޿ߡႎ๔ߒߡ߈ߚ
[1,4]੹࿁‫ޔ‬ᣂߚߦ㧔ᩣ㧕JFEࠛࡦࠫ࠾ࠕ࡝ࡦࠣ␠߆ࠄ‫੹ޕ‬࿁‫ޔ‬CNT 㒶ᭂࠍ㜞⚐ᐲߢ㜞⚿᥏ᕈߩ߽ߩߦࠕ࡯ࠢ᡼㔚ᴺߦࠃࠆ 2.6 mmI 㜞⚿᥏ CNT ࠞ࠰࡯ઍ߃‫ࠬ࡞ࡄޔ‬᏷߽ታ↪࡟ࡌ࡞ߦ߹ߢ❗߼ߡ⹜㛎ࠍ࠼ߩߏឭଏࠍฃߌ‫ޔ‬ടㅦ㔚࿶ 128 kV ߩਅ‫ޔ‬8 ns ߩⴕߞߚߩߢએਅߦႎ๔ߔࠆ‫ޕ‬ዏ‫ޔ‬㔚ሶ㌂࠹ࠬ࠻ࠬ࠲ታ↪⊛ߥࡄ࡞ࠬ᏷ߦߡࡆ࡯ࡓ⹜㛎ࠍⴕ޿‫࠼࡯࠰ࠞޔ‬ࡦ࠼ߩ᭴ᚑ߿᷹ቯ♽ߦߟ޿ߡߪᤓᐕᐲߩႎ๔ࠍෳᾖߩ㔚ᵹኒᐲ߇ 9.1 A/cm2 ߦ㆐ߒߚ‫ߩߎޕ‬ᚑᨐߦࠃࠅ‫[޿ߚࠇߐ ޔ‬1]‫ޕ‬ᓥ᧪߹ߢߩ฽ᶐဳᾲ㒶ᭂߦઍࠊࠆ‫ޔ‬CNT಄㒶ᭂࠍᜬߟ㜞ノᐲ㔚ሶ㌂ߩታ↪ൻ߇⷗߃ߡ߈ߚ‫ޕ‬
2.2 I-E ․ᕈ㧝㧚ߪߓ߼ߦ

㧞㧚CNTࠞ࠰࡯࠼ߩ㔚⇇᡼಴⹜㛎
2.1 CNTࠛࡒ࠶࠲߆ࠄߩ㔚⇇㔚ሶ᡼಴
 CNT ߪ 1991 ᐕߦᣣᧄߢ⊒⷗ߐࠇ‫ߩߘޔ‬㔚ሶࠛࡒ࠶࠲ߣߒߡߩ㜞޿ࡐ࠹ࡦࠪࡖ࡞ߦߟ޿ߡߪᣧߊߦᜰ៰ߐࠇ‫ޔ‬1995 ᐕߦߪᦨೋߩ㔚⇇㔚ሶ᡼಴․ᕈߩ
ႎ๔߇ߥߐࠇߚ[2]‫ߩߎޕ‬㔚ሶ᡼಴ߩࡔࠞ࠾࠭ࡓߦߟ޿ߡߪ‫ޔ‬CNT Tip ߳㜞㔚⇇߇㓸ਛߔࠆߎߣߦࠃࠅ‫ޔ‬
CNT ⴫㕙ߩ㔚ሶࠍ᜔᧤ߒߡ޿ࠆࡐ࠹ࡦࠪࡖ࡞㓚ო߇ᱡᦛߒߡᵻߊ਌ߟ⭯ߊߥࠅ‫ߚ޿ߡࠇߐ᧤᜔ޔ‬㔚ሶ߇࠻ࡦࡀ࡞ലᨐߦࠃߞߡ⌀ⓨਛߦᒁ߈಴ߐࠇࠆߣ޿߁⺑᣿߇ߥߐࠇߡ޿ࠆ‫ޕ‬1998 ᐕߦߪ‫ޔ‬CNT ࠍ㔚ሶḮߣߒߚశḮ▤࠺ࡃࠗࠬߩ⹜૞߇ⴕࠊࠇ[3]‫ߩߘޔ‬㐳ኼ๮ߣ㜞ノᐲ‫ߡߒߘޔ‬቟ቯߒߚ㔚ሶ᡼಴․ᕈ߇⏕⹺___________________________________________†

hozumiy@post.kek.jp

࿑ 1 ߦᧄࠞ࠰࡯࠼㧔㒶ᭂ㕙ߩ⋥ᓘ 2.6 mmI, 㔚ሶ᡼಴㕙Ⓧ 5.3 mm2㧕ߩ㔚ሶ᡼಴․ᕈࠍ␜ߔ‫❑ޕ‬ゲߪࡆ࡯ࡓࠠࡖ࠶࠴ࡖߢᝒ߃ߚ‫ޔ‬ടㅦߐࠇߚࠕࡁ࡯࠼ߩࡆ࡯ࡓ㔚ᵹ߆ࠄ឵▚ߒߚࠞ࠰࡯࠼ߩ㔚ᵹኒᐲ‫ޔ‬ᮮゲߪࠣ࡝࠶࠼㧙ࠞ࠰࡯࠼㑆ߦශടߐࠇߚ㔚⇇ᒝᐲߢ޽ࠆ‫ޕ‬㕍ߩ⪉ᒻߩ࡜ࠗࡦ߇ࠣ࡝࠶࠼㧙ࠕࡁ࡯࠼㑆ߩടㅦ㔚࿶߇ 100 kV ߩߣ߈ߩࡊࡠ࠶࠻ߢ޽ࠅ‫࡜ࠣޔ‬ࡈ਄ᣇߦ৻ὐߛߌ㘧ࠎߢ⷗߃ࠆ㤥޿✼ขࠅߩࡐࠗࡦ࠻߇‫࠼࠶࡝ࠣޔ‬㧙ࠞ࠰࡯࠼㑆ߩ㔚⇇ᒝᐲࠍᦨᄢߦ଻ߞߚ߹߹ടㅦ㔚࿶ࠍ 100 kV ߆ࠄ 128 kV ߦ਄᣹ߐߖߚߣ߈ߩ୯ߢ޽ࠆ‫ߩߘޕ‬ផ⒖ߩ᭽ሶࠍ࿑ 1 ਛߦ⍫ශߢ␜ߒߚ‫ޕ‬ടㅦ㔚࿶ࠍ਄ߍࠆߎߣߢࠞ࠰࡯࠼ߩ㔚ᵹኒᐲ߇Ⴧടߔࠆߣ޿߁ߎߣߪ‫ߩߎޔ‬㔚ሶ㌂ౝߩࡆ࡯ࡓ߇࡜ࡦ
ࠣࡒࡘࠕߩᑼߢ⴫⸥ߐࠇࠆߣߎࠈߩⓨ㑆㔚⩄೙㒢㗔ၞߦ౉ߞߡ޿ࠆߎߣࠍ␜ߒߡ޿ࠆ߆ࠄ‫ࠅࠃޔ‬㜞޿ࠞ࠰࡯࠼㔚ᵹኒᐲࠍᓧࠆߚ߼ߦߪࠣ࡝࠶࠼㧙ࠕࡁ࡯࠼㑆ߩടㅦ㔚࿶ࠍ਄ߍߡࡆ࡯ࡓߩᒁ߈಴ߒࠍⴕࠊߥߌ

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Proceedings of the 2nd Annual Meeting of Particle Accelerator Society of Japanand the 30th Linear Accelerator Meeting in Japan (July 20 - 22, 2005, Tosu Japan)ࠇ߫ߥࠄߥ޿‫੹ޕ‬ᓟ‫ޔ‬ടㅦ㔚࿶ࠍ 200 kV ⒟ᐲ߹ߢᧄߦℂᗐ⊛ߦ㔚⇇㓸ਛߒߡ޿ࠆᤨߩ୯ߣ╬ߒ޿ߣ޿਄ߍࠆ੍ቯߢ‫ߩߘޔ‬Ḱ஻ࠍㅴ߼ߡ޿ࠆߣߎࠈߢ޽ࠆ‫߁ ޕ‬೎ߩ⴫⃻߽น⢻ߢ޽ࠆ‫ߣ࠼࡯࠰ࠞᧄޕ‬㔚⇇㓸ਛߦ㑐ߔࠆ‫ ߪ⺰⼏޿ߒ⹦ࠅࠃޔ‬3 ┨ߢዷ㐿ߔࠆ‫ޕ‬I -E characteristics

F-N plot㪭㪸㪺㪺㩷㪔㩷㪈㪇㪇㩷㫂㪭㪏㪄㪋㪭㪸㪺㪺㩷㪔㩷㪈㪉㪏㩷㫂㪭㪭㪸㪺㪺㩷㪔㩷㪈㪇㪇㩷㫂㪭㪄㪌㪭㪸㪺㪺㩷㪔㩷㪈㪉㪏㩷㫂㪭

㪍

㪄㪍
㪋

Ln (I/E2)

Cathode Current Density(A/cm2)

㪈㪇㪉

㪄㪎
㪄㪏
㪄㪐

㪇
㪊

㪋

㪌

㪍

㪎

㪏

㪐

㪈㪇

㪄㪈㪇

ȕ 䋽 5×104 (cm-1),
1850

Cathode Field Strength (MV/m)㪄㪈㪈࿑1㧚㔚ᵹኒᐲ㧙㔚⇇ᒝᐲ․ᕈ
㪄㪈㪉
㪇㪅㪇㪌

2.3 Fowler-Nordheim ࡊࡠ࠶࠻㪇㪅㪈

㪇㪅㪈㪌

㪇㪅㪉

1/E㪇㪅㪉㪌㪇㪅㪊࿑ 2 ߪ‫ޔ‬࿑ 1 ߩ࠺࡯࠲ࠍ Fowler-Nordheim㧔FN㧕ࡊࡠ࠶࠻ߢ⴫ߒߚ߽ߩߢ޽ࠆ‫ߊࠃޕ‬⍮ࠄࠇߡ޿࿑2㧚Fowler-Nordheim ࡊࡠ࠶࠻ࠆࠃ߁ߦ‫ߩ࠻࠶ࡠࡊߩߎޔ‬௑߈߇⋥✢ߢ޽ࠆߥࠄ߫‫ޔ‬ߎߩ㔚ሶ᡼಴ߪ㊂ሶജቇߢℂ⸃ߐࠇࠆ࠻ࡦࡀ࡞ലᨐ
2.4 CNTࠞ࠰࡯࠼ߩኼ๮⹜㛎ߦ⿠࿃ߒߡ޿ࠆߎߣߩ⸽᜚ߣߥࠆ‫⹜ᧄޕ‬㛎ߢߩ㔚ሶ
࿑ 3 ߦ 24 ᣣ㑆ߦ෸߱ CNTࠞ࠰࡯࠼ߩኼ๮⹜㛎᡼಴ᯏ᭴߽‫ޔ‬࿑ 2 ߦࠃࠅ࠻ࡦࡀ࡞ലᨐߦࠃࠆ߽ߩߩ⚿ᨐࠍ␜ߔ‫ޕ‬ೋ߼ߩ3ᣣ㑆ߣ‫ߩࠣࡦ࠾ࡦ࡜ޔ‬ㅜਛߣ⏕⹺ߐࠇߚ‫ߩ࠻࠶ࡠࡊߩߎޕ‬௑߈߆ࠄ㔚⇇Ⴧ୚ଥߢ㔚ᵹ୯߇࠯ࡠઃㄭߦ⪭ߜߡ޿ࠆߩߪ‫ࠇߙࠇߘޔ‬᷹ᢙ Eࠍ᳞߼ࠆߎߣ߇ߢ߈ࠆ߇‫ޔ‬F-N ߩᑼߪᰴߩቯ♽ߩ⺞▵ߣ࠹ࠬ࠻ࠬ࠲ࡦ࠼ౝߦ┙ߜ౉ࠆᔅⷐ߇
㧔1㧕ᑼߢ⴫ߐࠇࠆ‫ޕ‬޽ߞߚߚ߼ߦ৻ᣤࡆ࡯ࡓടㅦࠍࠬ࠻࠶ࡊߒߚ߆ࠄߢ
ln(I / E 2 ) ln(a)  b(I 3 / 2 / E )޽ࠅ‫ߩߘޔ‬㑆߽ࠣ࡝࠶࠼㧙ࠞ࠰࡯࠼㑆ߢߩ㔚ሶ᡼಴  (1)ߪⴕࠊࠇߡ޿ߚ‫ޕ‬᷹ቯ᧦ઙߪ‫ޔ‬ടㅦ㔚࿶ 100 kV‫ޔ‬ߎߎߢ‫ޔ‬ࡄ࡞ࠬ᏷ 8 ns‫➅ޔ‬㄰ߒᢙ 50 pps ߢ޽ࠅ‫࠼࠶࡝ࠣޔ‬a 1.54 u 10 6 AE 2 / I ,㧙ࠞ࠰࡯࠼㑆ߩ㔚⇇ᒝᐲߪ߅ࠃߘ 9.1 MV/m‫࡯ࡆޔ‬(2)7ࡓߩടㅦࠬࡍ࡯ࠬߢ޽ࠆࠣ࡝࠶࠼㧙ࠕࡁ࡯࠼㑆ߩ㔚b 6.83 u 10 / E⇇ᒝᐲߪ 3.2 MV/m ⒟ߣߥߞߡ޿ࠆ‫ޕ‬ߣߥࠆ‫ޕ‬
2.3 ▵ߢㅀߴߚࠃ߁ߦ‫ߩ߈ߣߩߎޔ‬ടㅦ㔚࿶‫ߟޔ‬ࠣ࡜ࡈߩᮮゲࠍ 1/E ߦߣࠆߣ‫ޔ‬௑߈ߪ઀੐㑐ᢙ߹ࠅࠣ࡝࠶࠼㧙ࠕࡁ࡯࠼㑆ߩ㔚⇇ᒝᐲࠍ਄ߍࠆߣࠕI ߣ㔚⇇Ⴧ୚ଥᢙ E ߩ㑐ᢙߣߥࠆ‫ޕ‬࿑ 2 ߢߩ Eࡁ࡯࠼㔚ᵹ߇Ⴧ߃ࠆߩߢ‫ޔ‬ታ㓙ߪ CNT ߆ࠄࠃࠅᄙ
ߩᰴరߪ MV/m ߢ޽ࠆ‫ޕ‬CNT ߩ઀੐㑐ᢙߪ⒳‫ߩޘ‬ߊߩ㔚ᵹ߇ᓧࠄࠇߡ޿ࠆߪߕߢ޽ࠆ‫੹ޕ‬࿁ߩ࡜ࡦ࠾୯߇ႎ๔ߐࠇߡ߈ߡ߅ࠅ‫ޔ‬E࿃ሶߩ▚಴ߦ5 eV ࠍࡦࠣߪࠞ࠰࡯࠼ߩ㔚ᵹኒᐲ߇ 7.2 A/cm2 ઃㄭߢⴕߞណ↪ߒߡ޿ࠆႎ๔߽ᄙ޿ߩߛ߇‫ޔ‬᭎ߨࠣ࡜ࡈࠔࠗ࠻
ߡ޿ࠆ߇‫ޔ᧪ᧄޔ‬ታ㔚ᵹࠍ▚಴ߔࠆ㓙ߦߪ‫࠶࡝ࠣޔ‬ߩߘࠇߣᄌࠊࠄߥ޿ߎߣࠍൊ᩺ߒߡ‫੹ޔ‬࿁ߩ⸘▚ߢ࠼ߦᵹࠇㄟ߻㔚ᵹߩಽ߽ൊ᩺ߔߴ߈ߢ޽ߞߡ‫ߩߎޔ‬ߪ㜞㈩ะᕈࠣ࡜ࡈࠔࠗ࠻㧔HOPG㧕ߩ઀੐㑐ᢙ 4.4
୯ࠃࠅ߽ 30 % ⒟ߪ਄ਸ਼ߖߒߡ⸘▚ߔߴ߈ߢ޽ࠆ‫ޕ‬eV ࠍ↪޿ࠆߎߣߣߔࠆ‫ޕ‬એ਄ࠍ⠨ᘦߒߡ‫ޔ‬F-N ࡊࠃߞߡ‫ޔ‬ታ⾰ 9.4 A/cm2 ઃㄭߢߩ࡜ࡦ࠾ࡦࠣࠍⴕߞ
ࡠ࠶࠻ߩ௑߈ ] ߆ࠄ E࿃ሶߪ‫ޔ‬ߚߎߣߦߥࠆ⸶ߢ޽ࠆ‫ޕ‬ട߃ߡ‫ޔ‬2.2 ▵ߢ⼏⺰ߒߚE 6.3 u 10 4 / ](3)ࠃ߁ߦ੹࿁ߪⓨ㑆㔚⩄㗔ၞߢ࡜ࡦ࠾ࡦࠣࠍⴕߞߚߩ
ߣ᳞߼ࠆߎߣ߇ߢ߈ࠆ‫ޕ‬ߢ޽ࠆ߆ࠄ‫߇ࡓ࡯ࡆޔ‬චಽߦᒁ߈಴ߐࠇߡࡆ࡯ࡓ
࿑ 2 ߩ F-N ࡊࡠ࠶࠻ߩ௑߈ߩ⋥✢ㇱಽߩઃㄭ߆ࠠࡖ࠶࠴ࡖߢ᝝ࠄ߃ࠄࠇߡ߅ࠇ߫‫ޔ‬10 A/cm2 એ਄ࠄ▚಴ߐࠇࠆ E࿃ሶߩ୯㧔࿑2ෳᾖ㧕ߪ‫ޔ‬CNT 1ᧄߪ⵨ߦ⿥߃ߚ㗔ၞߢࡆ࡯ࡓ⹜㛎߇ⴕ߃ߚߪߕߢ޽ࠆ‫ޔ‬ߦኻߒߡචಽߦ㔚⇇߇ශടߐࠇߡ޿ࠆߣ߈ߩ E࿃ߣߎߩ⚿ᨐߪ␜ໂߒߡ޿ࠆߩߢ޽ࠆ‫ޕ‬ሶߩ୯ [5] ߣ৻⥌ߔࠆߎߣ߇್᣿ߒߚ‫ࠞᧄߪࠇߎޕ‬޿ߕࠇߦߒߡ߽⚂ 3 ㅳ㑆ߦᷰߞߡ቟ቯߒߚࡆ࡯
࠰࡯࠼਄ߩ CNT ኒᐲ߇ㆡᒰߥ㊂ߢ޽ࠆߚ߼‫ࠞޔ‬ࡓ߇ᓧࠄࠇߚߎߣߪ․╩ߔߴ߈ߎߣߢ޽ࠆ‫ޕ‬24 ᣣ࠰࡯࠼਄ߩ୘‫ ߩޘ‬CNT ߦචಽߥ㔚⇇㓸ਛ߇ᒁ߈⿠㑆ߩ࡜ࡦ࠾ࡦࠣߢ‫ޔ‬᡼಴㔚ᵹߪ⚂ 1.3 % ߩᷫዋߦߎߐࠇߚߎߣࠍ␜ߔ߽ߩߢ޽ࠅ[6]‫ޔ‬ℂᗐ⊛ߥ᧦ઙਅ⇐߹ߞߚ‫ޕ‬ߢ㔚ሶ᡼಴߇ߥߐࠇߚߣ⷗ߥߔߎߣ߇ߢ߈ࠆߩߢ޽
ࠅ‫ో࠼࡯࠰ࠞޔ‬㕙ߦਗ਼ࠆ E࿃ሶߩᐔဋ୯߇CNT 1-368-

Proceedings of the 2nd Annual Meeting of Particle Accelerator Society of Japanand the 30th Linear Accelerator Meeting in Japan (July 20 - 22, 2005, Tosu Japan)ࡦ࡮࠺࡞࡮ࡢ࡯࡞ࠬ⚿วߢࡃࡦ࠼࡞᭴ㅧࠍᚑߒߡ߅ࠅ‫ޔ‬ၮ᧼ߦኻߒߡᶋ޿ߡ޿ࠆᒙ޿⚿วࠍᜬߟ CNT߽ᄙ޿ߚ߼ߦ‫࠼࡯࠰ࠞޔ‬ၮ᧼ߦߒߞ߆ࠅߣᩮࠍਅࠈߒߡ޿ࠆᒝ޿⚿วࠍᜬߟ CNT એᄖߪ‫ޔ‬ශട㔚⇇ࠍᒝ߼ࠆߦᓥ޿‫ޔ‬⎕უ࡮㘧ᢔ߇ㅴߺ‫⚿ޔ‬ᨐߣߒߡ 2.2▵ߢㅀߴߚࠃ߁ߦ㔚ሶ᡼಴ࠨࠗ࠻߇ᷫዋߒߡ CNTኒᐲ߇ᦨㆡൻߐࠇߡࠞ࠰࡯࠼ߩࠦࡦ࠺࡚ࠖࠪ࠾ࡦࠣ߇ㅴ߻‫⚿ߩߘޕ‬ᨐ‫ޔ‬㔚ሶ᡼಴․ᕈߩ቟ቯൻ߽ㅴࠎߢࠁߊߩߢ޽ࠆ‫ޕ‬㪚㫌㫉㫉㪼㫅㫋㩷㪚㪿㪸㫅㪾㪼㩷㫎㫀㫋㪿㩷㪫㫀㫄㪼㪉㪙㪼㪸㫄㩷㪚㫌㫉㫉㪼㫅㫋㩷㪛㪼㫅㫊㫀㫋㫐㩷㩿㪘㪆㪺㫄 㪀㪈㪇㪐㪏㪎㪍㪌㪋㪊㧠㧚⚿⺰㪉㪈㪇㪇㪌㪈㪇㪈㪌㪉㪇㪛㪘㪰

࿑3㧚CNTࠞ࠰࡯࠼ߩኼ๮⹜㛎

㧟㧚CNTࠞ࠰࡯࠼ߩ⴫㕙ⷰኤ㪉㪌㜞⚐ᐲ CNT 㒶ᭂࠍ↪޿ߡ‫ޔ‬8 ns ߩታ↪⊛ߥࡄ࡞ࠬ᏷ߦߡࡆ࡯ࡓ⹜㛎ࠍⴕߞߚ⚿ᨐ‫ޔ‬9.1 A/cm2 ߽ߩࠞ࠰࡯࠼㔚ᵹኒᐲ߇ᓧࠄࠇߚ‫ߩߎޕ‬୯ߪ৻⥸⊛ߥᾲ㒶ᭂߢ޽ࠆ฽ᶐဳࠞ࠰࡯࠼ߩ᡼಴㔚ᵹኒᐲߦㄼࠆ߽
ߩߢ޽ࠅ‫ޔ‬CNT ಄㒶ᭂࠍᜬߟ㜞ノᐲ㔚ሶ㌂ߩታ↪
ൻ߇⷗߃ߡ߈ߚ‫ޔߚ߹ޕ‬CNTߣၮ᧼ߣߩࠝ࡯ࡒ࠶ࠢ
ធ⸅ᛶ᛫ߦࠃࠆ‫ࡦ࡚ࠪ࠶ࡒࠛޔ‬㔚ᵹߩᛥ೙߇ႎ๔ߐ
ࠇߡ޿ࠆ[7]ߩߢ‫੹ޔ‬ᓟടㅦ㔚࿶ࠍ਄ߍߡࠃࠅࠞ࠰࡯࠼㔚ᵹኒᐲ߇Ⴧߒߡⴕߊߣ໧㗴ߦߥߞߡߊࠆ߽ߩߣᕁࠊࠇࠆ‫ߩߎޕ‬ኻ╷߽⻠ߓߡࠁ߈ߚ޿‫ޕ‬⻢ㄉ࿑4㧚ࡆ࡯ࡓ⹜㛎೨㧔ᩣ㧕JFEࠛࡦࠫ࠾ࠕ࡝ࡦࠣߦߪ㜞⚐ᐲ CNT ࠞ࠰࡯࠼ࠍឭଏߒߡ޿ߚߛ޿ߚ‫ޔߚ߹ޕ‬ᢥㇱ⑼ቇ⋭࠽ࡁ࠹ࠢࡁࡠࠫ࡯✚วᡰេࡊࡠࠫࠚࠢ࠻㧔NPPP㧕ߩߏදജߦࠃࠅ‫↥ޔ‬ᬺᛛⴚ✚ว⎇ⓥᚲ࠽ࡁࡊࡠ࠮࠶ࠪࡦࠣᣉ⸳ߦ߅޿ߡ㜞ಽ⸃⢻㔚⇇᡼಴⿛ᩏဳ㔚ሶ㗼ᓸ㏜ࠍ૶↪ߔࠆߎߣ߇ߢ߈‫ᧄޔ‬Ⓜߦߘߩⷰኤ௝ࠍ⊓タߔࠆߎߣ߇ߢ߈ߚ‫ߡߒ⸥ߦߎߎޕ‬ᗵ⻢↳ߒ਄ߍࠆ‫ޕ‬ෳ⠨ᢥ₂[1][2][3][4]࿑5㧚ࡆ࡯ࡓ⹜㛎ᓟ

[5]

࿑4 ߪ‫ޔ‬FE-SEM ߦࠃࠆ㜞㔚⇇ශട೨ߩࠞ࠰࡯
[6]࠼⴫㕙ߩ௝ߢ޽ࠅ‫ޔ‬࿑5 ߪ‫⹜ࡓ࡯ࡆޔ‬㛎ᓟߩࠞ࠰࡯࠼⴫㕙ߩ౮⌀ߢ޽ࠆ‫ޕ‬ਔ౮⌀ߣ߽ࠞ࠰࡯࠼ߩਛᔃઃㄭߩ᭽ሶࠍ᠟ᓇߒߚ߽ߩߢ޽ࠆ‫ߦࠇߘޕ‬వ┙ߜ‫ޔ‬[7]ࠞ࠰࡯࠼ߩో㕙ߦਗ਼ߞߡⷰኤࠍⴕߞߡ߅ࠅ‫ޔ‬႐ᚲߦࠃࠆᒻ⁁ߩ㆑޿߇ߥ޿ߎߣࠍ⏕⹺ߒߡ޿ࠆ‫ޕ‬
࿑4 ߣ࿑ 5 ࠍᲧセߔࠇ߫᣿ࠄ߆ߢ‫ޔ‬㜞㔚࿶ශടᓟߩ CNT ኒᐲߪශടߔࠆ೨ߩߘࠇߣᲧߴߡ‫ޔ‬ૐߊߥߞߡ޿ࠆ‫ ߩ࠼࡯࠰ࠞᧄޕ‬CNT ࠛࡒ࠶࠲⟲ߪࡈࠔ

-369-ⓄⓍᐽᢥࠄ,“ࠞ࡯ࡏࡦ࠽ࡁ࠴ࡘ࡯ࡉ಄㒶ᭂࠍᜬߟ㔚⇇᡼಴㔚ሶ㌂ߩ㐿⊒ ”, ╙ 29 ࿁࡝࠾ࠕ࠶ࠢᛛⴚ⎇ⓥળࡊ
ࡠࠪ࡯࠺ࠖࡦࠣࠬ, pp. 350-352 (2004).
J. M. Bonard et al., “Field emission from carbon
nanotubes: the first five years”, Solid State Electronics, vol.
45, pp. 893-914 (2001).
Y. Saito et al., Jpn. J. Appl. Phys., vol. 39, p. 346 (1998).
ᄢᴛືࠄ,“ࠞ࡯ࡏࡦ࠽ࡁ࠴ࡘ࡯ࡉ಄㒶ᭂߩ․ᕈ᷹ቯ”,╙28࿁࡝࠾ࠕ࠶ࠢᛛⴚ⎇ⓥળࡊࡠࠪ࡯࠺ࠖࡦࠣࠬ, pp.
120-122 (2003).
᫪ਭ␭มࠄ, “ࠞ࡯ࡏࡦ࠽ࡁ࠴ࡘ࡯ࡉ㧝ᧄߦࠃࠆᓸዊ㔚⇇᡼኿㔚ሶḮߩ૞ᚑߣ⹏ଔ”, ፉᵤ࡟ࡆࡘ࡯, vol. 60,
No. 1.2, pp. 25-33 (2003).
L. Nilsson et al., “Scanning field emission from patternedcarbon nanotube films”, Appl. Phys. Lett., vol. 76, No. 15,
pp. 2071-2073 (2000).
J. B. Cui et al., “Control of field emission current ofindividual sites by a local resistor”, J. Vac. Sci. Technol. B
vol. 20(1), pp. 19-24 (2002).