Operating Manual

Plug-In Boards for Total Pressure Gauge
Controller TPG300 and TPG500
CP300C9CP300T11
CP300T11L
IF300A
IF300P
IF301P

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About this Document
This document describes the plug-in boards for the total pressure gauge controller TPG300 and TPG500, intended as a supplement to the documentation of thebasic unit TPG300 (→  [1]), TPG500 (→  [2]).

ValidityThis document applies to plug-in boards listed below
Type

Description

Part number

CP300C9CP300T11
CP300T11L
IF300A
IF300P

Pirani / cold cathode measurement board
Pirani / cold cathode measurement board
Pirani / cold cathode measurement board
Interface and relay board (RS232C)
Interface and relay Board with mechanical relays(Profibus)
Interface and relay Board with PhotoMOS relays(Profibus)

IO441000
IO441080
IO441120
IO441130
IO441395

IF301P

IO441396

The part number can be taken from the product nameplate.

2

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Contents
About this Document
Validity2
2

1 Safety
1.1 General Safety Information
1.2 Symbols Used
1.3 General Stipulations

4
4
4
4

2 Description
2.1 Pirani / Cold Cathode Measurement Board CP300xxx
2.2 Interface and Relay Board IF300P
2.3 Interface and Relay Board IF301P
2.4 Pirani Measurement
2.5 Cold Cathode Measurement

5
5
5
5
5
5

3 Technical Data
3.1 Pirani / Cold Cathode Measurement Boards CP300xxx
3.2 Interface and Relay Board IF300A
3.3 Interface and Relay Board IF300P
3.4 Interface and Relay Board IF301P

6
6
7
8
9

4 Installation
4.1 Installing / Removing the Plug-In Boards
4.2 Connecting the Pirani Gauge
4.3 Connecting the Cold Cathode Gauge
4.4 Connecting the <OUTPUT> Analog Signal
4.5 Connecting the Relays of the IF300A
4.6 Connecting the Relays of the IF30xP
4.7 Connecting the Profibus-DP Interface to the IF30xP
4.8 Connecting the RS232C Interface to the IF300A

10
10
10
11
12
12
12
13
13

5 Adjustment
5.1 Adjusting the Pirani Measurement Circuit

14
14

6 Troubleshooting
6.1 Operating and Adjustment Problems
6.2 Defects
6.3 Problems with the RS232C Interface
6.4 Problems with the Profibus-DP Interface

15
15
15
15
16

7 Accessories
7.1 Gauges
7.2 Measurement Cables and Cable Connectors

17
17
17

Appendix
A: Output Signals of the Measurement Boards
B: Gas Type Dependence
C: Literature

19
19
20
22

For cross-references within this document, the symbol (→  XY) is used; for crossreferences to further documents listed under ‘Literature’, use is made of the symbol(→  [Z]).

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1 Safety
1.1 General Safety
Informationa) Take the necessary precautions when doing installation work.
It may be necessary implement additional protective measures in the system.
b) Before connecting any external elements, check that they are compatible withthe technical data in this document.
c) Take the necessary precautions when doing maintenance or repair work.

Skilled personnel
All work described in this document may only be carried out by persons who
have suitable technical training and the necessary experience or who have been
instructed by the end-user of the product.

1.2 Symbols Used

Note

Waiting time, reaction time, duration of test<…>

1.3 General Stipulations

Marking

Since the individual components are delicate, appropriate measures must be taken
to protect them from static electricity. Store modules in antistatic bags or containers.
Damage resulting from incorrect handling may lead to a revocation of theguarantee.
INFICON accepts no responsibility nor warranty if the user or third parties••

4

utilize the product not according to the defined use
make any kind of changes (modifications, alterations, etc.) to the product.

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2 Description
2.1 Pirani / Cold Cathode
Measurement Board
CP300xxx

The CP300xxx board is a combined board containing one Pirani and one cold
cathode measurement circuit.

Pirani measurement circuit

The Pirani measurement circuit has one gauge cable connector, two trimmer potentiometers and one analog signal output. When the control unit is on, the Pirani
measurement circuit is in continuous operation. The analog signal is constantly
available, independent of what is shown on the pressure display.

Cold cathode measurement
circuit

The cold cathode measurement circuit for the measurement of high and ultra highvacuum has one gauge cable connector and one analog signal output. When thegauge is turned on, the analog signals are constantly available, independent ofwhat is shown on the pressure display.
This measurement board contains special electronics to limit the measurement
current to 100 µA, a feature that considerably extends the lifetime of the gauge.

2.2 Interface and Relay
Board IF300P

The IF300P board contains a RS232C interface and a Profibus-DP interface. The
board has five mechanical relays with one floating changeover contact each.

2.3 Interface and Relay
Board IF301P

The IF301P board contains a RS232C interface and a Profibus-DP interface. The
board has five PhotoMOS relays with one floating changeover contact each.

2.4 Pirani Measurement

Within certain limits the thermal conductivity of gases is a function of the pressure.
Pirani thermal conductivity vacuum gauges exploit this phenomenon for pressure
measurements.
The measurement element consists of a thin filament with a high temperature coefficient. The resistance of the wire and consequently its temperature are maintained at a constant value by means of a suitable control circuit. The electrical
power supplied to the filament is, therefore, a measure of the thermal conductivity
and consequently the gas pressure.

2.5 Cold Cathode
Measurement

The current flowing in a self-sustained gas discharge with a cold cathode (inverted
magnetron) depends on the applied voltage, the gas composition, and the pressure. A magnetic field that penetrates the measurement chamber has the effectthat the electrons move along a spiral trajectory from the cathode to the anode andthereby cause even at low gas densities a sufficient number of ionizing impacts formaintaining the discharge. If (with a known gas type) the anode voltage and magnetic field are kept constant, the discharge current is a measure of the pressure.

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3 Technical Data
3.1 Pirani / Cold Cathode
Measurement Boards
CP300xxx
CP300C9
Number of measurement circuits
Gauges

CP300T11L
1 eachTPR018, IKR084 … 086

TPR018, IKR086

8×10-4 … 1000
5×10-9 … 5×10-3

8×10-4 … 1000
1×10-11 … 5×10-3

Display range (signal output) 1)
PiraniCold cathode

mbar
mbar

Cable length
Pirani, max.
Cold cathode, max.

m
m

100
60 2) … 100

Power supply cold cathode gauges
Operating voltage
Measurement current

kV
µA

3.3
≤600

3.3
≤100

Signal output
Measured value, analog
Error message
Current, max.
Output resistance

V
V
mA
Ω

0 … +10
>11.5
2
400

0 … +10
>11.5
2
400

ms
ms

<50
<600

<50
<600

ms

<10

<50

Amphenol C91E, 6-pin
SHV coaxial
ø2 mmAmphenol C91E, 6-pin
triaxial
ø2 mm

≈0.21

≈0.25

Reaction time (10  90%) for suddenpressure step
Pirani<10-3  103 mbar
103  10-3 mbar
Cold cathode10-9 ⇔ 103 mbar

6CP300T11

1 eachConnection, equipment side
Pirani gauge
Cold cathode gauge
Signal output

femalefemalefemaleWeightkg
1)

N2-equivalent2)

when using the lower measurement range limit (→  10)

100
500

500
500

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3.2 Interface and Relay
Board IF300A

Relay
NumberContact type

Characteristic data (ac)Switching voltage, max.
Switching current, max.
Switching power, max.
Characteristic data (dc)
Switching current, max.

Connection, equipment side
Type
Transition resistance with socket
InterfaceType
Baud rates
Data format
Connection, equipment side
Cable length, max.
Weight5
1 change over contact eachfloating
max. 50 V(ac) relative to other contacts and ground
50 V (ac)
1.5 A
75 VA
Switching voltages >50 V (dc) areinadmissible for savety reasons
0.6 A at 50 V (dc)
0.8 A at 40 V (dc)
1.5 A at 30 V (dc)D-sub connector, 15-pin, male
125 mΩ
RS232C, asynchronous
300, 1200, 2400, 4800, 9600
ASCII
1 start bit, 8 data bits,
1 stop bit, no parity bit
D-sub connector, 9 pin, male30 m
≈0.14 kg

Before connecting any external elements, check that they conform to theabove technical data and the controller is switched off for at least
15 seconds.

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3.3 Interface and Relay
Board IF300P

Relay
NumberContact type

Characteristic data (ac)Switching voltage, max.
Switching current, max.
Switching power, max.
Characteristic data (dc)
Switching voltage, max.
Switching current, max.

Switching power, max.

5mechanical relay
1 change over contact eachfloating
max. 50 V (ac) relative to othercontacts and ground
50 V (ac)
1.5 A
75 VA
30 V (dc)switching voltages >50 V (dc) areinadmissible for safety reasons
1.5 A
0.6 A at 50 V (dc)
0.8 A at 40 V (dc)
1.5 A at 30 V (dc)
45 VA

Connection, equipment side
Type
Transition resistance with socket

D-sub connector, 15-pin, maleInterfaceType
Baud rates
Data format

Profibus-DP<12Mbaud

Connection, equipment side
Cable length, max.
Weight

125 mΩ

Profibus-DP interface →  [3]D-sub connector, 9-pin, male→  [3]≈0.16 kg

Before connecting any external elements, check that they conform to theabove technical data and the controller is switched off for at least
15 seconds.

8

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3.4 Interface and Relay
Board IF301P

Relay
NumberContact type

Characteristic data (ac)Switching voltage, max.
Switching current, max.
Switching power, max.
Characteristic data (dc)
Switching voltage, max.
Switching current, max.
Switching power, max.

5
PhotoMOS relay
1 change over contact eachfloating
max. 50 V (ac) relative to othercontacts and ground
50 V (ac)
0.5 A
25 VA
30 V (dc)switching voltages >50 V (dc) areinadmissible for safety reasons
0.5 A
15 W

Connection, equipment side
Type
Transition resistance with socket

D-sub connector, 15-pin, maleInterfaceType
Baud rates
Data format

Profibus-DP<12Mbaud

Connection, equipment side
Cable length, max.
Weight2.5 ΩProfibus-DP interface →  [3]D-sub connector, 9-pin, male→  [3]≈0.16 kg

Before connecting any external elements, check that they conform to theabove technical data and the controller is switched off for at least
15 seconds.

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94 Installation
GeneralUse screened cables only (connect screen to barrel of connector). If
both ends of the screen are connected to ground, compensating
currents must be prevented (e.g. by connecting all involved units to acommon power distributor).
In a Profibus-DP installation (IF300P, IF301P board), use the recommended special cable only (→  [3]).

4.1 Installing / Removing
the Plug-In Boards

For safety reasons, vacant slots should always be covered with blankpanels.
Disconnect all cables from the unit before installing / removing any plugin modules.

Modules should only be handled on an ESD protected bench.

Procedure•

Switch off the unit and wait one minute•

Remove all cables (power cable last)•Unscrew the blind plate / plug-in module•

Insert / remove plug-in module•

Screw on the plug-in module / blind plate•

Connect the cables (mains cable first)•

Switch on the unit again

To ensure correct operation, check that the screws of the plug-in
modules are tightened.

4.2 Connecting the Pirani
Gauge

Additional protective measures must be taken if certain processes in thevacuum system (e.g. flashovers) can cause hazardous voltages on thegauge terminals.
Although the gauge cables are screened, they should not be routed inparallel to lines producing strong electrical noise.
Connect the gauge to the <TPR> connector on the rear panel. The connectors arelocked so that they cannot be separated accidentally.
Bevorzugen Sie bei Kabellängen <100 m die Messkarte für kurze Kabel,da sonst der Abgleich schwieriger ist. Bei Messröhrenkabeln >100 m ist die
Version für lange Kabel zu verwenden.

10

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4.3 Connecting the Cold
Cathode Gauge

Additional protective measures must be taken if certain processes in thevacuum system (e.g. flashovers) can cause hazardous voltages on thegauge terminals.
Although the gauge cables are screened, they should not be routed inparallel to lines producing strong electrical noise.
Connect the gauge to the <IKR> connector. Coaxial cables normally suffice. The
following diagram indicates the conditions under which a triaxial cable is required.

The maximum length of 100 m for coaxial cables is specified by
EN 61010. Greater lengths are not admissible without additional protective measures.
If the gauge is not grounded via the vacuum chamber, it must be
grounded separately.

If the cable length is >100 m (only admissible with triaxial cable), theconnectors must be protected against unintentional separation andcontact of the center conductor. The cable must only be plugged in or
detached while the unit is switched off for at least 15 seconds.

Protection against unintentional separation of the triaxial connector.

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4.4 Connecting the<OUTPUT>
Analog Signal

Each measurement circuit is equipped with an analog
signal output. Matching connectors are included witheach measurement board.

4.5 Connecting the Relaysof the IF300A
Pin Assignment

The relay connector on the rear of the IF300A has the following pin assignment:
15
8
7
14
6
13
5
12
4
11
3
10
2
1
9

Relay 1
(Switching function 1)
Relay 2
(Switching function 2)
Relay 3
(Switching function 3)

IF 300A

9

1

15

8

Relay 4
(Switching function 4)
Relay 5
(Error status)
ScreenContacts shown de-energized

Pin location

4.6 Connecting the Relaysof the IF30xP
Pin Assignment

12

The relay connector on the rear of the IF30xP has the following pin assignment:

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4.7 Connecting theProfibus-DP Interface tothe IF30xP
Pin Assignment

In a Profibus-DP installation, use the recommended special cable only(→  [3]).
The interface connector on the rear of the IF30xP has the following pin assignment:

4.8 Connecting the RS232C
Interface to the IF300A
Pin Assignment

The interface connector on the rear of the IF 300A has the following pin
assignment:
IF 300A
TXD
RXD
S GND
Computer

RTS
CTS
DTR
DSR
CCD

2
3

2
3

7

5

4
5

TXD
RXD
S GND

3
2
5

Screen

20
6
8
6
9

1
5

Pin 3 = Transmit data TXD *)Pin 2 = Receive data RXD *)Pin 5 = Signal gnd
Housing = Screen*) Reference point: IF 300A

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5 Adjustment
Pirani measurement circuits are factory-adjusted to the standard gauge. Due tomanufacturing tolerances, contamination of the gauges, and different cable
lengths, deviations are inevitable.
Cold cathode measurement circuits are factory-adjusted and require no readjustment.

5.1 Adjusting the Pirani
Measurement Circuit

Two trimmer potentiometers are available for compensating the gauge tolerances, gauge contamination, ordifferent cable lengths, within certain limits.

The adjustment should only be performed
after the equipment has attained operating
temperature (≈10 minutes).

Adjustment at High Vacuum

Adjustment at AtmosphericPressure

14•

With gauge connected, lower the vacuum chamber pressure to <1×10-4 hPa•

Select the measurement circuit to be adjusted (»sensor« mode)•

With the <HIGH VAC> potentiometer adjust the display to 8.0×10-4 hPa•

Turn the potentiometer clockwise by 90°•«ur 10-4» should now be displayed (→  [1]).

•Expose the gauge to atmospheric pressure (vent the vacuum chamber)•

Turn the <ATM> potentiometer to obtain a reading of 1.0×103 hPa•

Decrease the pressure to <1×10-4 hPa•

Check the high vacuum reading and readjust, if necessary.

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6 Troubleshooting
In addition to the guidelines below, take the documentation of the other systemcomponents into account (→ Literature  22).

6.1 Operating andAdjustment Problems

ProblemPossible cause

Correction

Pirani reading too highPirani gauge contaminatedAdjust Pirani measurement
circuit (→  14)
Clean gauge (→  [4])Replace gauge

Cold cathode reading
too high

Connector insulation
contaminated or moist

Clean insulation or replaceconnector

Air humidity( leakage current)

Keep the air humidity low
Keep the equipment inconstant operation

Cold cathode reading
too low

Cold cathode gauge
contaminatedClean gauge(→  [5])Replace ionization chamber

Pirani can not be
adjusted

Incorrect combination
measurement board –gauge – cable

Select correct combination(→  10)Gauge severely contami- Clean or replace gauge
nated(→  [5])6.2 Defects

ProblemPossible cause

Correction

Cold cathode constantly
indicates « OR »(overrange), (eventhoughthe pressure is within themeasuring range)

Short circuit in the cold
cathode cable / gauge

Replace or repair the cable /gauge

Cold cathode measurement board defective

Replace the cold cathodemeasurement
board(→  10)

Cold cathode indicates
No IKR gauge connected Connect the gauge« UR » (underrange),even though the pressure
is within the measuring
range

6.3 Problems with theRS232C Interface

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Interruption in cold
cathode cable

Replace or repair the cable

Cold cathode gauge
defective

Replace the gauge(→  [5])Cold cathode measurement board defective

Replace the cold cathodemeasurement board(→  10)

ProblemPossible cause

Correction

No communication

Pin 2 and 3 of the interface cable not crossed

Use the correct cable

Incorrect Baud rate

Match Baud rate

Incorrect data format

Adhere to the format
specified for the TPG300,
TPG500 (→  [1], [2])15

6.4 Problems with theProfibus-DP Interface

ProblemPossible cause

Correction

No communication

Incorrect Baud rate 1)

Set Baud rate to 19200 Baud

Incorrect data format

Adhere to the standardized
Profibus-DP data format(→  [3])Incorrect firmware

Firmware TPG300: 302-654
Firmware Profibus: V1.5

Incorrect Baud rate 1)

Set Baud rate to 19200 Baud

Cycle time >100 ms

1)

16

At the controller TPG300, firmware 302-654 or higher

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7 Accessories
7.1 Gauges

Gauge

Compatible tomeasurement board:

Vacuum connection

Ordering number

TPR018→  [4]CP300C9, T11, T11L

DN 16 ISO-KF
DN 40 CF-F

IO G15 020
IO G15 024

IKR084→  [5]CP300C9

DN 40 ISO-KF
DN 40 CF-F

PT R18 770
PT R18 771

IKR085→  [5]CP300C9

DN 40 ISO-KF
DN 40 CF-F

PT R18 772
PT R18 773

IKR086→  [5]CP300C9, T11, T11L

DN 40 ISO-KF
DN 40 CF-F

PT R18 776
PT R18 777

7.2 Measurement Cables
and Cable Connectors
Pirani Measurement cables

With Amphenol C91 and Lemo (standard plugs on each side).
Length [m]80 °C
Pirani Measurement
cables for TPR018

250 °C
Measurement cables, hightemperature version for TPR0181)

3

IC100003

tbd

5

IC100005

tbd

10

IC100010

tbd

15

IC100015

tbd

20

IC100020

tbd

25

IC100025

tbd

30

IC100030tbd

35

IC100035

tbd

40

IC100040

tbd

45

IC100045

tbd

50

IC100050

tbd

1)

Pirani measurement cable for TPR018:

42
Amphenol C91E
1
male
5
3

Pirani cable connectors
controller side

Pirani cable connectors
gauge head side

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Connectors controller side

4
2 LEMO
1 female5

Ordering Number

Amphenol C91

IT4722125

Crimp contact C91 plug connector

IT4722841

Connectors gauge head side

Ordering Number

Lemo 4.3 – 5.2 mm

IT4722062

Lemo 5.3 – 6.2 mm

IT4722063

17

Cold Cathode Measurment
CablesWith SHV and Triax Lemo (standard plugs on each side).
(Test voltage: 6 kV (dc))
Length[m]

80 °C
Pirani Measurement
cables for IKR085

250 °C
Measurement cables, hightemperature version for IKR0851)

3

IC1250003

tbd

5

IC1250005

tbd

10

IC1250010

tbd

15

IC1250015

tbd

20

IC1250020

tbd

25

IC1250025

tbd

30

IC1250030

tbd

35

IC1250035

tbd

40

IC1250040

tbd

45

IC1250045

tbd

50

IC1250050

tbd

Measurement cables for IKR086 are to be defined.

Cold cathode cableconnectors controller side

Cold cathode cableconnectors gauge head side18

Connectors controller side

Ordering Number

SHV-50-Peek

IT4726605

SHV-50-Capton

IT4728606

Connectors gauge head side

Ordering Number

Triax

IT1001030

Coax

IT100103116

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Appendix
A:

Output Signals of the
Measurement Boards
Pirani Gauge
TPR018 with CP300C9

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19Cold Cathode Gauge
IKR08x with CP300C9B:

Gas Type Dependence
Pirani Gauge TPR018

20

Indicated pressure (instrument calibrated for air)IG9972BEN/A(2021-03)

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Cold Cathode Gauge IKR08x

Indicated pressure (Instrument calibrated for air)

(Mean values, deviations possible depending on degree of contamination).
Reference gauge: Hot cathode ionization gauge

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C:

22

Literature [1]Operating Manual
Total Pressure Gauge Controller TPG300
IG9970BEN
INFICON AG, LI–9496 Balzers, Liechtenstein [2]Operating Manual
Total Pressure Gauge Controller TPG500
IG6008BEN
INFICON AG, LI–9496 Balzers, Liechtenstein [3]Communication Protocol
Profibus-DP Interface Board IF300P, IF301P
IG9973BEN
INFICON AG, LI–9496 Balzers, Liechtenstein [4]Operating Manual
Pirani Gauge TPR018
BG9976BEN
INFICON AG, LI–9496 Balzers, Liechtenstein [5]Operating Manual
Cold Cathode Gauge IKR084, IKR085, IKR086
IG9048BEN
INFICON AG, LI–9496 Balzers, Liechtenstein

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NotesIG9972BEN/A(2021-03)

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23

LI–9496 Balzers
LiechtensteinTel +423 / 388 3111
Fax +423 / 388 3700
reachus@inficon.com

Original: English

i g9972ben/ awww.inficon.com