3M™ Diamond Pad Conditioners
Reliable pad conditioning
performance
The chemical mechanical planarization(CMP) process relies on getting the mostout of each pad in terms of performanceand wear.
3M™ Diamond Pad Conditioners refresh
your CMP pad surfaces, minimize wear, andmaintain consistent asperities and consistentpad performance from wafer to wafer.
The patterned diamond grid with highly
controlled spacing helps enable you tobetter predict and optimize your CMP pad
usage, for better planarization efficiency —time after time.

Diamonds that stay intact
and in place� 3M proprietary high-temperature
sintered abrasive technology
locks diamonds in place with bothmechanical and chemical bonds ina special metal matrix� Edge exclusion zone provides
zero diamond fractures on theconditioner edge — where stresses
are at their highest� Choose from our extensive libraryof diamond pad conditioners or
customize your own
� 3M™ CMP Pad Conditioner
Coatings can be factory-added tohelp minimize metal leaching anddefectivity

Could you significantly lengthen yourCMP pad life by using 3M™ Diamond
Pad Conditioners?

ControlledPerformance� 3M™ Diamond Pad Conditioner
diamonds are firmly secured with
3M proprietary sintered abrasivetechnology� Controlled diamond spacing andprotrusion results in excellent padplanarity

Increased
Pad Life� Customizable pad conditioners
for your preferred conditioning
aggressiveness� Longer disk life helps you reduce
maintenance and costof ownershipResponsive Supportand Supply� Multiple geographicallyindependent 3M manufacturing
and research facilities aroundthe world provide prompt, local
technical support and supply� Tight flatness specification for
3M disks enhances pad wear
uniformity and pad planarity

3M™ CMP Pad Conditioner Coatings
Enjoy effective conditioning for metal-sensitive processes. 3M™ CMP PadConditioner Coatings are a durable layer over the pad conditioner, which can help
reduce metal leaching by up to 75%. The coating combines with powerful 3M
sintered abrasive technology to further minimize micro and macro scratching defects.

Safety Data Sheet: Consult Safety Data Sheet before use.
Regulatory: For regulatory information about this product, contact your 3M representative.
Technical Information: The technical information, recommendations and other statements contained in this document are based upon tests or experience that 3M
believes are reliable, but the accuracy or completeness of such information is not guaranteed.
Product Use: Many factors beyond 3M’s control and uniquely within user’s knowledge and control can affect the use and performance of a 3M product in a particularapplication. Given the variety of factors that can affect the use and performance of a 3M product, user is solely responsible for evaluating the 3M product and determining
whether it is fit for a particular purpose and suitable for user’s method of application.
Warranty, Limited Remedy, and Disclaimer: Unless a different warranty is specifically stated on the applicable 3M product packaging or product literature, 3M warrantsthat each 3M product meets the applicable 3M product specifications on the Certificate of Analysis, which is established when the product is manufactured and deemedcommercially available and is provided at the time 3M ships the product. 3M MAKES NO OTHER WARRANTIES OR CONDITIONS, EXPRESS OR IMPLIED, INCLUDING,BUT NOT LIMITED TO, ANY IMPLIED WARRANTY OR CONDITION OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE OR ANY IMPLIEDWARRANTY OR CONDITION ARISING OUT OF A COURSE OF DEALING, CUSTOM, OR USAGE OF TRADE. If a 3M product does not conform to this warranty, thenthe sole and exclusive remedy is, at 3M’s option, replacement or repair of the 3M product or refund of the purchase price.
Limitation of Liability: Except where prohibited by law, 3M will not be liable for any loss or damage arising from the 3M product, whether direct, indirect, special,incidental, or consequential, regardless of the legal or equitable theory asserted, including, but not limited to, warranty, contract, negligence, or strict liability.
Disclaimer: For industrial use only. Not intended, labeled or packaged for consumer sale or use.

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Electronics Materials Solutions Division
3M Center, Building 224-3N-11
St. Paul, MN 55144-1000 USA
1-800-810-8513 phone
3M.com/CMP

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Issued: 8/23 60-5005-0303-6