INSTRUCTION SHEETIPN 074-07 3B

Sputtering Sensor Shutter Module
Installation Instructions

Introduction
The Sputtering Sensor Shutter Module installation kit was designed to facilitate themounting of a pneumatic shutter module onto a sputtering sensor. The pneumatic shutter
module is assembled and tested prior to shipment.
To install the pneumatic shutter module, you must have the following parts:
Item # Qty.

Description

IPN

1

1

Pneumatic Shutter Assembly

750-005-G1

2

1

Sputtering Sensor Assembly

750-618-G1

NOTE: The following parts are listed as suggested equipment
and may be ordered separately.
311” Crystal Feedthroughwith Airline (or equivalent)

750-030-G1

4

1

2 3/4” Single Coaxial Instrumentation
Feedthrough Copper Gasket

002-043-G1

5

1Shutter Control Valve Assembly

750-420-G1

ORInstallation
Before you begin the installation, refer to the illustrations to get an idea of how the parts
are assembled. The shutter assembly may be installed onto a new Sputtering sensor ora used sensor in good condition.

1 Remove the actuator cover screw (4-40 x 3/16) on the shutter assembly and remove
the actuator cover. See Figure 1.

2 Remove two waterline clamp screws (4-40 x 1/4—not shown) and remove the clamp.
See Figure 1.
Figure 1 Top View
Actuator CoverSensor Cover

ShutterActuator
MountingScrews

Actuator Cover Screw

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INSTRUCTION SHEETIPN 074-07 3B

Sputtering Sensor Shutter Module
Installation Instructions

3 Remove the sensor body assembly from the sensor cover and set it in a clean, safe
place. This is to protect the head during the installation. See Figure 2.
Figure 2 Side View
Sensor Cover

Water Tube
Clamp

Sensor Body
AssemblyCable

4 Place the sensor cover on the shutter module assembly as shown in Figure 3. Thesensor water lines will fit between the shutter pivot and stop screw. Carefully bend
the water lines as shown.
Figure 3 Bottom View
Stop Screw

Shutter Pivot

Stop Screw

Actuator
Mounting Bracket

Water Tube Clamp

5 Position the water line clamp on the shutter assembly and install the two mounting
screws. Tighten the screws finger tight.

6 Position the assembly as shown in Figure 1. The shutter should cover the sensor
cover as shown in Figure 1. It may be necessary to align the sensor slightly toachieve correct positioning.

7 The plane of the shutter and sensor cover should be parallel as shown in Figure 2.
Again, it may be necessary to align the sensor slightly to achieve correct positioning.

8 Tighten the two water line clamp screws.
9 Manually rotate the shutter away from the sensor cover as shown in Figure 1;
operation should be smooth and unobstructed.

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INSTRUCTION SHEETIPN 074-07 3B

Sputtering Sensor Shutter Module
Installation Instructions

10 Install the actuator cover on the shutter actuator assembly and install the actuator
cover screw (4-40 x 3/16). Refer to Figure 1.

11 Install the sensor body assembly into the sensor cover. The assembly will now
appear as Figure 2.

Testing Procedure
NOTE: Test procedures apply to shutter operation only.
To perform the test, connect a temporary air supply (100 PSIG max.) to the actuatorairline and test operation (10-25 cycles). Shutter movement should be smooth, rapid andcomplete when operated at 90-95 PSIG. When activated, the shutter should rotate awayfrom the crystal opening. When deactivated, the shutter should retract completely overthe crystal opening. If operation is impaired, lubricate the moving parts with molybdenum
disulfide in isopropyl alcohol provided (IPN 750-191-G1).

Maintenance
The sensor module should be dismantled and lubricated with molybdenum disulfide inisopropyl alcohol (IPN 750-191-G1) approximately every 2000 strokes in the areas
specified on DWG 750-005 (see Figure 4). Failure to lubricate may significantly reduce
life of operation or cause the assembly to become totally inoperative.

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INSTRUCTION SHEETIPN 074-07 3B

Sputtering Sensor Shutter Module©2006 INFICONFigure 4 Drawing 750-005

Installation Instructions

G LO BA L H E A D QUA RT E R S :Two Technology Place, East Syracuse, NY 13057 USA
Tel: +1.315.434.1100 Fax: +1.315.437.3803 E-mail: reachus@inficon.com
Vi s i t u s o n t h e we b a t : www.inficon.com

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