Operating Maual

High Pressure / Pirani Gauge
HPG400HPG400-SD
HPG400-SP

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1

Product Identification

In all communications with INFICON, please specify the information on the productnameplate. For convenient reference copy that information into the space provided
below.

INFICON AG, LI-9496 Balzers

Typ:
No:
F-No:
V

Validity

W

This document applies to products with the following part numbers:
HPG400 (without display)353-520 (vacuum connection DN 25 ISO-KF)
353-522 (vacuum connection DN 40 CF-R)
HPG400 (with display)353-521 (vacuum connection DN 25 ISO-KF)
353-523 (vacuum connection DN 40 CF-R)
HPG400-SD (with DeviceNet interface and switching functions)353-527 (vacuum connection DN 25 ISO-KF)
353-528 (vacuum connection DN 40 CF-R)
HPG400-SP (with Profibus interface and switching functions)353-525 (vacuum connection DN 25 ISO-KF)
353-526 (vacuum connection DN 40 CF-R)
The part number (PN) can be taken from the product nameplate.

If not indicated otherwise in the legends, the illustrations in this document correspond to gauge with part number 353-520. They apply to theother gauges by analogy.
All HPG400 versions are shipped with an instruction sheet (→[8]).
HPG400-SD and HPG400-SP come with a supplementary instruction sheet describing the fieldbus interfaces and the switching functions (→[9]).
We reserve the right to make technical changes without prior notice.

2

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Intended Use

The HPG400 gauges have been designed for vacuum measurement of non-flammable gases and gas mixtures in a pressure range of 2×10-6 … 1 mbar. The control range of the gauge allows trend display from <1 mbar to 1000 mbar.
The gauges can be operated in connection with the INFICON Vacuum Gauge
Controller VGC4XX or with other control devices.

Functional Principle

The HPG400 functions with a HP (high pressure) hot cathode ionization manometer, which is controlled by the built-in Pirani manometer (control range). The hot
cathode is switched on only below the switching threshold of ≈1 mbar (to prevent
filament burn-out). For pressures above this threshold, the Pirani signal is output.
Over the whole measuring range, the measuring signal is output as logarithm of thepressure.

Trademarks

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DeviceNet™

Open DeviceNet Vendor Association, Inc.

3

Contents

4

Product Identification
Validity
Intended Use
Functional Principle
Trademarks

2
2
3
3
3

1 Safety
1.1 Symbols Used
1.2 Personnel Qualifications
1.3 General Safety Instructions
1.4 Liability and Warranty

6
6
6
7
7

2 Technical Data

8

3 Installation
3.1 Vacuum Connection
3.1.1 Removing and Installing the Electronics Unit
3.2 Electrical Connection
3.2.1 Use With INFICON VGC4XX Vacuum Gauge Controller
3.2.2 Use With Other Controllers
3.2.2.1 Making a Sensor Cable
3.2.2.2 Making a DeviceNet Interface Cable (HPG400-SD)
3.2.2.3 Making a Profibus Interface Cable (HPG400-SP)
3.2.3 Using the Optional Power Supply (With RS232C Line)

13
13
15
16
16
17
17
19
20
21

4 Operation
4.1 Measuring Principle, Measuring Behavior
4.2 Operational Principle of the Gauge
4.3 Putting the Gauge Into Operation
4.4 Display (HPG400)
4.5 RS232C Interface
4.5.1 Description of the Functions
4.5.1.1 Output String (Transmit)
4.5.1.2 Input String (Receive)
4.6 DeviceNet Interface (HPG400-SD)
4.6.1 Description of the Functions
4.6.2 Operating Parameters
4.6.2.1 Operating Software
4.6.2.2 Node Address Setting
4.6.2.3 Data Rate Setting
4.6.3 Status Lights
4.7 Profibus Interface (HPG400-SP)
4.7.1 Description of the Functions
4.7.2 Operating Parameters
4.7.2.1 Operating Software
4.7.2.2 Node Address Setting
4.8 Switching Functions (HPG400-SD, HPG400-SP)
4.8.1 Setting the Switching Functions

23
23
25
26
27
28
28
28
30
31
31
31
31
31
32
32
33
33
33
33
33
34
34

5 Deinstallation36

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6 Maintenance, Repair
6.1 Maintenance
6.2 Adjusting the Gauge
6.2.1 Pirani Adjustment (HPG400)
6.2.2 Pirani Adjustment (HPG400-SD, HPG400-SP)
6.3 Adjusting the Calibration Setting of the Hot Cathode6.4 What to Do in Case of Problems
6.5 Replacing the Sensor

37
37
37
37
38
39
40
42

7 Options

43

8 Spare Parts

43

9 Storage

43

10 Returning the Product44

11 Disposal

44

Appendix
A: Relationship Output Signal – Pressure
B: Gas Type Dependence
C: Literature

45
45
46
48

Declaration of Contamination49

For cross-references within this document, the symbol (→references to other documents, the symbol (→[Z]).

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XY) is used, for cross-5

1 Safety
1.1 Symbols Used
DANGER
Information on preventing any kind of physical injury.

WARNING
Information on preventing extensive equipment and environmental damage.

CautionInformation on correct handling or use. Disregard can lead to malfunctions or minor equipment damage.

NoticeHint, recommendation

The result is O.K.

The result is not as expected

Optical inspection

Waiting time, reaction time

1.2 Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by persons who
have suitable technical training and the necessary experience or who have been
instructed by the end-user of the product.

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1.3 General Safety
Instructions•

Adhere to the applicable regulations and take the necessary precautions for theprocess media used.
Consider possible reactions between the materials (→ 11) and the process
media.
Consider possible reactions of the process media (e.g. explosion) due to heatgenerated by the product.

•

Adhere to the applicable regulations and take the necessary precautions for all
work you are going to do and consider the safety instructions in this document.

•

Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

Communicate the safety instructions to all other users.

1.4 Liability and Warranty

INFICON assumes no liability and the warranty becomes null and void if the enduser or third parties•

disregard the information in this document•

use the product in a non-conforming manner•make any kind of interventions (modifications, alterations etc.) on the product•use the product with accessories not listed in the corresponding product documentation.

The end-user assumes the responsibility in conjunction with the process media
used.

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7

2 Technical Data
Measurement

Measuring range (air, N2)
Hot cathode
Pirani (control range)
Accuracy
10-5 … 1 mbar

Repeatability-5-1
10 … 10 mbar
10-1 … 100 mbar
Gas type dependence

Emission

Switching (changeover) threshold(selectable from 5 defined setpoints)

Emission current
from 1 mbar
to 2×10–6 mbar
Anode voltage

Output signal

Identification of the gauge

8

Voltage range
Measuring range
Hot cathode
Pirani
Overrange hot cathode
Underrange hot cathodeOverrange Pirani
Underrange Pirani

2×10-6 … 1 mbar
1×10-2 … 1000 mbar
±15% of reading(valid between 10-5 mbar and changeover threshold setting (<P ↔ HP>,→ 25).
(after 10 min. stabilization)±2% of reading±30% of reading→ Appendix B

1 mbar
5×10–1 mbar
2×10–1 mbar
1×10–1 mbar
5×10–2 mbar
continually rising
4 µA
130 µA
180 V

0 … +10.2 VDC
1.5 … 7.5 V
8.5 … 9.75 V
7.5 V ≤ U ≤ 8.0 V
0.5 V ≤ U ≤ 1.5 V
9.75 V ≤ U ≤ 10.2 V
8.0 V ≤ U ≤ 8.5 V
logarithmic, → Appendix A
1.00 V/decade0.25 V/decade

Relationship voltage-pressure
Hot cathode
PiraniError signals
Hot cathode error
Pirani error≤+0.3 V, →≤+0.5 V, →Min. load impedance

10 kΩ, short cicuit proof

Resistor

56 kΩ between pin 10 and pin 5(sensor cable connector)

40
40

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Display (HPG400)

For gauges with part numbers
353-521353-523
Display panel

LCD matrix, 32×16 pixels,
with background illumination
green = normal operation
red = error/warning → 27)
16.0 mm × 11.2 mm
Pressure, pressure unit, status,
error messages
mbar (factory setting), Torr, Pa(selecting the pressure unit → 28)

Dimensions
Parameters
Pressure units

Power supply

DANGER
The gauge must only be connected to power supplies, instruments orcontrol devices that conform to the requirements of a grounded extralow voltage (SELV-E according to EN 61010). The connection to thegauge has to be fused (INFICON controllers fulfill these requirements).
Operating voltage at the gauge
Power consumption
Standard
Emission start (<200 ms)
Power consumption
HPG400, HPG400-SD
HPG400-SP
Fuse necessary+24 VDC (20 … 28 VDC) 1)
ripple max. 2 Vpp≤0.5 A≤1.4 A≤16 W≤18 W
1.25 AT

HPG400-SD requires an additional, separate power supply for theDeviceNet interface (→ 19).
Supply voltage at the DeviceNet
connector (Pin 2 and Pin 3)+24 VDC (+11 … 25 VDC)
Power consumption<2 W
The gauge is protected against reversed polarity of the supply voltage.

1)

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Measured at sensor cable connector (consider the voltage drop as function of
the sensor cable length).
9Sensor cable connection
For reasons of compatibility, the expression "sensor cable" is used for all
HPG400 versions in this document, although the pressure reading of thegauges with fieldbus interface (HPG400-SD and HPG400-SP) is normally transmitted via the corresponding bus.
Electrical connector
HPG400HPG400-SD, HPG400-SP
Cable for HPG400
Analog values only
Incl. RS232C interface andidentification
Cable for HPG400-SD, HPG400-SP
Max. cable length (supply voltage 24 V)
Analog and fieldbus operation

RS232C- and VGC4XX operation
Switching functions
HPG400HPG400-SD, HPG400-SP
Adjustment range

Relay contact rating
Voltage
Current

RS232C interface

Data rate
Data format

Connections (sensor cable connector)
TxD (Transmit Data)
RxD (Receive Data)
GND

D-Sub,15 pins, male
→ 17
→ 18
4 conductors plus shielding
7 conductors plus shielding
depending on the functions used,max. 14 conductors plus shielding≤35 m, conductor cross-section 0.25 mm²≤50 m, conductor cross-section 0.34 mm≤100 m, conductor cross-section 1.0 mm²
≤30 m
none
2 (Setpoint A and B)
2×10-6 mbar … 100 mbar
Setpoints adjustable via potentiometers(setpoints A and B), one floating, normally open relay contact per setpoint(→ 18, 34).
≤60 V
≤0.5 ADC

9600 Baudbinary8 data bits
one stop bit
no parity bit
no handshakePin 13
Pin 14Pin 5

Function and communication protocol of the RS232C interface →DeviceNet interface(HPG400-SD)

For HPG400-SD gauges with part numbers:
353-527353-528
Fieldbus nameStandard applied

DeviceNet

Communication protocol, data format→[1], [4]CAN busInterface, physicalData rate(adjustable via "RATE" switch)
Node address (MAC ID)(Adjustable via "ADDRESS", "MSD","LSD" switches)

10

28

→

[6]

125, 250 and 500 kBaud"P" (125, 250 and 500 kBaud, programmable via DeviceNet (→[1]))
0 … 63dec"P" (programmable 0 … 63 via
DeviceNet, →[1])

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DeviceNet connector
Cable
Cable length, system wiring

Profibus interface(HPG400-SP)

For HPG400-SP gauges with part numbers:
353-525353-526
Fieldbus nameStandard applied

Profibus

Communication protocol, data format
Interface, physical→[2], [7]RS485

Data rate≤12 MBaud (→Node address
Local:(Adjustable via hexadecimal"ADDRESS", "MSD", "LSD"switches)
Via Profibus:(hexadecimal "ADDRESS" switches
set to >7dhex (>125dec))

00 … 7Dhex (0 … 125dec)

Profibus connection
Cable
Cable length, system wiring

VacuumMaterials exposed to vacuum
Housing, supports, screens
Feedthroughs
Insulator
CathodeCathode holder
Pirani element
Internal volume353-520, 353-521
353-525, 353-527
353-522, 353-523
353-526, 353-528
Pressure max.

Environment

Admissible temperatures
Storage
Operation
Bakeout
Relative humidity(year's mean / during 60 days)
Use
Type of protection

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Micro-Style, 5 pins, male
Shielded, special DeviceNet cable,
5 conductors (→ 19 and[4])
According to DeviceNet specifications(→[4], [6])

→

[7]

[2])

00 … 7Dhex (0 … 125dec)
D-Sub, 9 pins, female
Shielded, special Profibus cable(→ 20 and[5])
According to Profibus specifications(→[5], [7])stainless steel
NiFe, nickel plated
glass
iridium, yttrium oxide (Y2O3)
molybdenum
tungsten, copper≤20 cm3≤20 cm3≤30 cm3≤30 cm3
5 bar (absolut)(only for Inert gases andtemperatures <100 °C).

-20 … 70 °C
0 … 50 °C+150 °C (without electronics unit)≤65 / 85% (no condensation)indoors only
altitude up to 2000 m NN
IP 30

11

Dimensions [mm]Part numbers
353-520353-521353-5251)
353-527

Part numbers
353-522353-523353-526353-528 1)

4-40UNC 2B

4-40UNC 2B

DN 25 ISO-KF
DN 40 CF-R

1)

Gauges with DeviceNet connector are 14 mm longer.
The other dimensions of housing and vacuum connection are identical.
Part numbers
353-527353-528Weight353-520, 353-521
353-522, 353-523
353-525, 353-527
353-526, 353-528

12

285 g
550 g
430 g
695 g

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3 Installation
3.1 Vacuum Connection

DANGER
Caution: overpressure in the vacuum system >1 bar
Injury caused by released parts and harm caused by escaping processgases can result if clamps are opened while the vacuum system ispressurized.
Do not open any clamps while the vacuum system is pressurized. Use
the type of clamps which are suited to overpressure.

DANGER
Caution: overpressure in the vacuum system >2 bar
KF flange connections with elastomer seals (e.g. O-rings) cannot
withstand such pressures. Process media can thus leak and possibly
damage your health.
Use O-rings provided with an outer centering ring.

DANGER
The gauge must be electrically connected to the grounded vacuum
chamber. This connection must conform to the requirements of a protective connection according to EN 61010:•

CF connections fulfill this requirement•

For gauges with a KF vacuum connection, use a conductive metallic clamping ring.

CautionCaution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures toensure cleanliness and prevent damages.

The gauge may be mounted in any orientation. To keep condensatesand particles from getting into the measuring chamber, preferablychoose a horizontal to upright position. See dimensional drawing forspace requirements(→ 12).

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The gauge is supplied with a built-in baffle.

•

The sensor can be baked at up to 150 °C. At temperatures exceeding 50 °C,
the electronics unit has to be removed (→ 15).

13

Procedure

Remove the protective lid.

The protective lid will beneeded for maintenance.

Make the flange connection to the vacuum system, preferably without applying vacuum grease.

When installing the gauge, make sure that the area around the connector is accessible for the tools required for adjustment while the gauge
is mounted
When installing the gauge, allow for installing/deinstalling the connectors
and accommodation of cable loops.
If you are using a gauge with display, make sure easy reading of thedisplay is possible.
The gauge is now installed.

14

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3.1.1 Removing and Installing
the Electronics Unit
Required tools / material•

Allen key, size 2.5 mm

Removing the electronics unit
Unscrew the hexagon socket set screw (1) on the side of the electronics
unit (2).
21Remove the electronics unit without twisting it.

Removal of the electronics unit is completed.

Installing the electronics unit
Place the electronics unit on the sensor (3) (be careful to correctly align thepins and notch (4)).

43

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15

Slide the electronics unit in to the mechanical stop and lock it with the hexagon socket set screw (1).
The electronics unit is now installed.

3.2 Electrical Connection
3.2.1 Use With INFICON
VGC4XX Vacuum Gauge
Controller

If the gauge is used with an INFICON VGC4XX controller, a corresponding sensor
cable is required (→ 43). The sensor cable permits supplying the gauge withpower, transmitting measurement values and gauge statuses, and making parameter settings.

CautionCaution: data transmission errors
If the gauge is operated with the INFICON VGC4XX Vacuum Gauge
Controller (RS232C) and a fieldbus interface at the same time, datatransmission errors may occur.
The gauge must not be operated with an INFICON VGC4XX controller
and DeviceNet or Profibus at the same time.

Required material•

Sensor cable (→[10] INFICON sales literature)

Procedure
Plug the sensor connector into the gauge and secure it with the locking
screws.
Connect the other end of the sensor cable to the INFICON controller andsecure it.

The gauge can now be operated with the VGC4XX controller.
16

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3.2.2 Use With Other
Controllers

The gauge can also be operated with other controllers.
Especially the fieldbus versions HPG400-SD (DeviceNet) and HPG400-SP(Profibus) are usually operated as part of a network, controlled by a master or bus
controller. In such cases, the control system has to be operated with the appropriate software and communication protocol (→[1] and [2]).

3.2.2.1 Making a Sensor Cable
For reasons of compatibility, the expression "sensor cable" is used for all
HPG400 versions in this document, although the pressure reading of thegauges with fieldbus interface (HPG400-SD or HPG400-SP) is normallytransmitted via DeviceNet or Profibus.
The sensor cable is required for supplying all HPG400 types with power.
In connection with the gauges with fieldbus interface (HPG400-SD and
HPG400-SP), it also permits access to the relay contacts of the switching functions (→ 18, 34).

Cable typeThe application and length of the sensor cable have to be considered when determining the number and cross sections of the conductors (→ 10).

ProcedureOpen the cable connector (D-Sub, 15 pins, female).

Prepare the cable and solder/crimp it to the connector as indicated in the
diagram of the gauge used:

Sensor cable connection
HPG400HPG400

TxD

13

RxD

14

Measuring signal

2

RS232C+

12
1.25AT
+U b

8

+

5
56kΩ

10

24 V

Identification

15

Electrical connection
Pin 2 Signal output (measuring signal) 0 … +10 V
Pin 5 Supply voltage common, GND
Pin 8 Supply voltage +24 VDC1
9
Pin 10 Gauge identifcation
Pin 12 Signal common, GND
Pin 13 RS232C, TxD
15
8
Pin 14 RS232C, RxD
Pin 15 Shielding, housing, GND
D-Sub, 15 pins
femalePins 1, 3, 4, 6, 7, 9 and 11
soldering side
are not connected internally.

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17Sensor cable connection
HPG400-SD, HPG400-SP

HPG400-SD, HPG400-SP
Threshold value, SP A

3

Threshold value, SP B

6
1

SP A

4
9

SP B

11

TxD

13

RxD

14

RS232

7
+Ub

8

Measuring
signal2

1.25 AT
24V

12
56 kΩ

5
10

Identification

15

Electrical connection
Pin 1 Relay Switching function A, COM contact
Pin 2 Signal output (measuring signal)
0 … +10 V
Pin 3 Threshold value (Setpoint) A
0 … +10 V
Pin 4 Relay Switching function A, N.O. contact
Pin 5 Supply common, GND
Pin 6 Threshold value (Setpoint) B
0 … +10 V
Pin 7 not connected
Pin 8 Supply voltage+24 V
Pin 9 Relay Switching function B, COM contact
Pin 10 Gauge identification
Pin 11 Relay Switching function B, N.O. contact
Pin 12 Signal common, GND
Pin 13 RS232, TxD
Pin 14 RS232, RxD
Pin 15 Shielding, housing, GND

9

1

15

8

D-Sub, 15 pins
femalesoldering side

WARNING
The supply common (Pin 5) and the shielding (Pin 15) must beconnected at the supply unit with protective ground.
Incorrect connection, incorrect polarity or inadmissible supply
voltages can damage the gauge.

For cable lengths up to 5 m (0.34 mm2 conductor cross-section) the output signal can be measured directly between the positive signal output(Pin 2) and supply common GND (Pin 5) without loss of accuracy. At
greater cable lengths, differential measurement between signal output(Pin 2) and signal common (Pin 12) is recommended.

Reassemble the cable connector.

On the other cable end, terminate the cable according to the requirementsof the gauge controller you are using.

18

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Plug the sensor connector into
the gauge and secure it with thelocking screws.

Connect the other end of the sensor cable to the connector of the instrument or gauge controller you are using.
The gauge can now be operated via analog and RS232C interface.

3.2.2.2 Making a DeviceNet
Interface Cable(HPG400-SD)
Cable typeFor operating HPG400-SD via DeviceNet, an interface cable conforming to theDeviceNet standard is required.
If no such cable is available, make one according to the following indications.

A shielded special 5 conductor cable conforming to the DeviceNet standard has tobe used (→[4], [6]).

Procedure
Make the DeviceNet cable according to the following indications.
1
2

4

Micro-Style, 5 pins,(DeviceNet)female, soldering side

5
3

Pin 1
Pin 2
Pin 3
Pin 4
Pin 5

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Drain
Supply+24 VDC
Supply common GND
CAN_H
CAN_L

(DeviceNet interface only)(DeviceNet interface only)

19

Plug the DeviceNet (and sensor) cable connector into the gauge.

DeviceNet cable

Sensor cable

Lock the DeviceNet (and sensor) cable connector.
The gauge can now be operated via DeviceNet interface (→3.2.2.3 Making a Profibus
Interface Cable(HPG400-SP)
Cable type31).

For operating HPG400-SP via Profibus, an interface cable conforming to theProfibus standard is required.
If no such cable is available, make one according to the following indications.
Only a cable that is suited to Profibus operation may be used (→[5], [7]).

Procedure
Make the Profibus interface cable according to the following indications.
1

5

D-Sub, 9 pins
male, soldering side
6

Pin 1
Pin 2
Pin 3
Pin 4
Pin 5
Pin 6
Pin 7
Pin 8
Pin 9

20

9

Do not connect
Do not connect
RxD/TxD-P
CNTR-P
DGND
VP
Do not connect
RxD/TxD-N
Do not connect

1)
2)
2)

1)

Only to be connected if an optical link module is used.

2)

Only required as line termination for devices at both ends of bus cable
(→
[5]).

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Plug the Profibus (and sensor) cable connector into the gauge.

Sensor cable
Profibus cable

Lock the Profibus (and sensor) cable connector.
The gauge can now be operated via Profibus interface (→3.2.3 Using the Optional
Power Supply(With RS232C Line)
Technical datatina31e1(2004-05)

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33).

The optional 24 V power supply (→ 43) allows RS232C operation of the HPG400
gauge with any suitable instrument or control device (e.g. PC).
The instrument or control device needs to be equipped with a software that supports the RS232C protocol of the gauge (→ 28).
Mains connection
Mains voltage
Mains cable

90 … 250 VAC 50 … 60 Hz
1.8 meter(Schuko DIN and U.S. connectors)

Output (operating voltage of gauge)
Voltage
Current

21 … 27 VDC, set to 24 VDC
max. 1.5 A

Gauge connection
Connector
24 V cable

D-Sub, 15 pins, female
5 m, blackConnection of the instrument orcontrol device
RS232C connection
Cable

D-Sub, 9 pins, female
5 m, black, 3 conductors, shielded21

Wiring diagram

8
7
6
4
5

5

13

2

HPG400
D-Sub, 15 pins 14

RS232CD-Sub, 9 pins

3

8
15
+24 V

L

DC
GND

Mains
90 ... 250 VAC
PE 50 ... 60 Hz
N

AC

PE

Connecting the power supply
Connect the gauge to the power supply and lock the connector with thescrews.
Connect the RS232C line to the instrument or control device and lock theconnector with the screws.

PC

RS232CPower supply

Mains

HPG400Connect the power supply to the mains.

Turn the power supply on.
The gauge can now be operated via RS232C interface (→

22

28).

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4 Operation
4.1 Measuring Principle,
Measuring Behavior
High pressure (HP) hot cathodeThe HPG400 consists of two separate measuring systems (high pressure (HP) hot
cathode and Pirani).

The HP hot cathode measuring system is based on the electrode arrangement
shown in the figure below, which grants sensitivity, linearity, and stability even athigh pressures.
The measuring principle of this system is based on gas ionization. Electrons emitted by the hot cathode (F) ionize a number of molecules proportional to the pressure in the measuring chamber. The ion collector (IC) collects the thus generated
ion current I+ and feeds it to the electrometer amplifier of the measuring instrument.
The ion current is dependent on the emission current Ie, the gas type, and the gaspressure p according to the following relationship:
I+ = I e × p × C
Factor C represents the sensitivity of the gauge. It is generally specified for N2.
-6
The lower measurement limit is 2×10 mbar.
-6
In order for the entire range of 2×10 mbar … 1 mbar to be covered, the emission
current is continually increased from 4 µA at 1 mbar to 130 µA at 2×10-6 mbar (notransients due to switching of the emission current).

IC
F

EC

IC

EC

Diagram of the HP measuring systemF
hot cathode (filament)
IC ion collector
EC electron collector (anode)F

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23

Pirani (control range)

Within certain limits, the thermal conductance of gases is pressure dependent. This
physical phenomenon is used for pressure measurement in the thermal conductance vacuum meter according to Pirani. A self-adjusting bridge is used as measuring circuit. A thin tungsten wire is used as sensor element. Wire resistance andthus temperature are kept constant through a suitable control circuit. The electric
power supplied to the wire is a measure for the thermal conductance and thus thegas pressure. The basic principle of the self adjusting bridge circuit is shown below.
Um

–

+

Pirani sensor

The bridge voltage Um is a measure for the gas pressure and is further processed
electronically (linearization, conversion).

Measuring range,changeover threshold

The HPG400 covers the measuring range 2×10-6 ... 1000 mbar.

Hot cathode HP

Pirani2 × 10 mbar
-61000 mbar

5×10-2 mbar ... 1 mbar userdefinable changeover threshold•

The Pirani permanently monitors the pressure.

•

The hot cathode (controlled by the Pirani) is activated only at pressures<1 ... 5×10-2 mbar (threshold can be set with a switch).

If the measured pressure is higher than the set changeover threshold (which canbe selected with a switch within the range of 1 ... 5×10-2 mbar), the hot cathoderemains off and the Pirani value is output as signal (→ Appendix A).
When the pressure measured by the Pirani drops below the threshold, the hot
cathode is activated. This is indicated by a green lamp. After warming up of themeasuring system, the hot cathode value is output. When the pressure rises above
the set threshold, the hot cathode is deactivated, and the Pirani value is output
again.

24

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HPG400 v1.om

4.2 Operational Principle of
the Gauge

Selecting thechangeover threshold

The measuring currents of the HP hot cathode and Pirani sensors are converted
into a frequency. A micro controller converts this frequency into a digital value representing the measured total pressure. After further processing this value is available as analog measurement signal (0 … +10.2 V) at the output (sensor cableconnector Pin 2 and Pin 12) with the usable ranges 1.5 … 7.5 V (hot cathode) and8.5 … 9.75 V (Pirani). The maximum output signal is internally limited to +10.2 V(atmosphere). The measured value can be read as digital value through theRS232C interface (Pins 13, 14, 15) (→ 28). Gauges with a display show thevalue as pressure. The default setting of the displayed pressure unit is mbar. It canbe modified via the RS232C interface (→ 28).
In addition to converting the output signal, the micro controller's functions include
monitoring of the emission, calculation of the total pressure based on the measurements of the two sensors, and communication via RS232C interface.

The HPG400 has five definable changeover thresholds (setpoint "emission on"). It
is thus possible to prevent the switching range from being situated within the process pressure range. The factory setting of the threshold is 1 mbar. Other setpoints
can be selected via the <P ↔ HP> switch. Since the contamination of the hot
cathode system is reduced at low pressures, the lowest possible setpoint should beselected.

Since the switch position is only polled upon activation of the gauge, thesetpoint should be selected before the gauge is turned on.

EMI ON

Hot cathode mode
Pirani modetina31e1

Switch position<P ↔ HP>

Corresponding setpoint

0 or 12 or 34 or 5
6 or 7
8 or 91 mbar (factory setting)
5×10–1 mbar
2×10–1 mbar
1×10–1 mbar
5×10–2 mbar

Accuracy

The gauge is factory-calibrated. Adjustment may become necessary due to use indifferent climatic conditions, extreme temperatures, contamination or aging(→ 37).
-1
The accuracy is reduced in the pressure range above 1×10 mbar and below-5
1×10 mbar.

Gas type dependence

The output signal is gas type dependent. The characteristic curves (→ Appendix A)
are accurate for dry air, N2 and O2. They can be mathematically converted for othergases (→ Appendix B).
If you are using a INFICON vacuum gauge controller, you can enter a calibration
factor to correct the displayed measured value (→of the corresponding measurement unit).

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25

Contamination
Gauge failures due to contamination are not covered by the warranty.
The HPG400 is designed in such a way that contamination by process products is
minimal. The baffle and the closed internal design of the measuring system as wellas the heat generated by the measuring system contribute to this.
The HPG400 is factory-adjusted in such a way that the hot cathode is switched on
at ≈1 mbar. A lower threshold can be set in order for the contamination of the system to be reduced (→ 25). The gauge can also be switched externally by the
supply voltage, control by the Pirani still being insured.
In case of severe contamination, the measuring system should be replaced(→ 42).

4.3 Putting the Gauge Into
Operation

When the operating voltage is supplied (→ "Technical Data", 8 and "Electrical
Connection", 16), the output signal is available between Pin 2 (+) and Pin 12 (–)
of the sensor cable connector (Relationship Output Signal – Pressure→ Appendix A).

Allow for a stabilizing time of approx. 10 min. Once the gauge has beenswitched on, permanently leave it on irrespective of the pressure.
Communication via the digital interfaces is described in separate sections.

26

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4.4 Display (HPG400)

The gauges with part numbers
353-501 and353-503have a built-in two-line display with an LCD matrix of 32×16 pixels. The first line
shows the pressure in normal operation, the second line the pressure unit, thefunction and operational status and possible error messages.
The background illumination is usually green, in the event of an error, it changes tored.
Pressure reading
StatusPressure unit

Pressure display
Pressure reading in mbar (factory setting), Torr or Pa.
The pressure unit can be changed via RS232C interface(→ 28).

Function display (status)
E=

Emission of HP hot cathode onA=

Adjustment at atmosphericpressure in progressok=Normal operation, no error(green background illumination)

FAIL lonG 5
FAIL lonG 8
FAIL lonG 9===

Pirani sensor warning
Hot cathode sensor warning
Pirani sensor error(red background illumination)

Error display

Internal data connection failure(red background illumination)

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27

4.5 RS232C Interface

The built-in RS232C interface allows transmission of digital measurement data andinstrument conditions as well as the setting of instrument parameters.

CautionCaution: data transmission errors
If the gauge is operated with the RS232C interface and a fieldbus interface at the same time, data transmission errors may occur.
The gauge must not be operated with the RS232C interface andDeviceNet or Profibus at the same time.

4.5.1 Description of the
FunctionsOperational parameters

Electrical connections

The interface works in duplex mode. A nine byte string is sent continuously withouta request approx. every 20 ms.
Commands are transmitted to the gauge in a five byte input (receive) string.
•

Data rate

9600 Baud•Byte

8 data bits
1 stop bit•

TxD

Pin 13•RxD

Pin 14

•

GND

Pin 5

set value, no handshake(Sensor cable connector)

4.5.1.1 Output String (Transmit)

Format of the output string

The complete output string (frame) is nine bytes (byte 0 … 8). The data string isseven bytes (byte 1 … 7).
Byte No.
0
1
2
3
4
5
6
7
8

Synchronization

Value
7
5

0 … 255
0 … 255
0 … 255
11
0 … 255(Set value)(Set value)→ Status byte
→ Error byte
→ Calculation of pressure value→ Calculation of pressure value→ Software version(For HPG400 gauges)→ Synchronization

Synchronization of the master is achieved by testing three bytes:
Byte No.

1)28

Function
Length of data string
Page number
StatusError
Measurement high byte
Measurement low byte
Software version
Sensor type
Check sum

Function

Value

Comment

0

Length of data string

7(Set value)

1

Page number

5(Set value)

8

Check sum of bytes No. 1 … 7

0 … 255

Low byte ofcheck sum 1)

High order bytes are ignored in the check sum.

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Status byte

Bit 1

Bit 0

Definition

0
0

0
1

Emission off
Emission on

Bit 2

Definition01

Error byte

Software version

1000 mbar adjustment off
1000 mbar adjustment on

Bit 3

Definition0⇔1

Toggle bit, changes with every
string received correctly

Bit 5

Bit 4

0
0
1

0
1
0

Definition

Bit 7

Bit 6

Definitionxx

Not used

Bit 3

Bit 2

Bit 1

Bit 0

Definition

x

x

x

x

Not used

Bit 7

Bit 6

Bit 5

Bit 4

0
1
1

1
0
0

0
0
0

1
0
1

Current pressure unit mbar
Current pressure unit Torr
Current pressure unit Pa

Definition
Pirani adjusted poorly
Hot cathode error
Pirani error

The software version of the gauge can be calculated from the value of byte 6 of thetransmitted string according to the following rule:
Version No. = ValueByte 6 / 20
(Example: According to the above formula, ValueByte 6 of 32 means software version 1.6)

Calculation of thepressure value

The pressure can be calculated from bytes 4 and 5 of the transmitted string. Depending on the measuring range (hot cathode or Pirani) and the currently selectedpressure unit (→ byte 2, bits 4 and 5), the appropriate rule must be applied.
As result, the pressure value results in the usual decimal format.
Measuring range hot cathode(Range of values for byte 4 and 5 = 16666dec … 48666dec)
p

=

Where

10(high Byte × 256 + low Byte) / 5333.3) - k1
Pressure unit

k1

mbar
Torr
Pa

9.125
9.249903
7.125

Measuring range Pirani(Range of values for byte 4 and 5 = 54000dec … 60666dec)
pWhere

tina31e1(2004-05)

HPG400 v1.om=10(high Byte × 256 + low Byte) / 1333.3) - k2
Pressure unit

k2

mbar
Torr
Pa

42.5
42.624903
40.5

29

Example

The example is based on the following output string:
Byte No.

0

1

2

3

4

5

6

7

8

Value

7

5

0

0

242

48

20

11

63

The instrument or controller (receiver) interprets this string as follows:
Byte No.
0
1
2
3
4
5
6
7
8

4.5.1.2 Input String (Receive)
Format of the input string

Error
Measurement
High byte
Low byte
Software version
Sensor type
Check sum

7

(Set value)

50(Set value)
Emission = off
Pressure unit = mbar
No error

0
235
48
20
11
63

Byte No. Function

1)

Calculation of the pressure:p = 10(235 × 256 + 48) / 1333.3 - 42.5 = 454 mbar
Software version = 20 / 20 = 1.0(HPG400 gauges)
5 + 0 + 0 + 235 + 48 + 20 + 11 =319dec 01 3Fhex
High order byte is ignored ⇒Check sum = 3Fhex 63dec

Length of data string
Data
Data
Data
Check sum(from bytes No. 1 … 3)

Value
3

0 … 255(Set value)→ admissible input strings→ admissible input strings→ admissible input strings(low byte of sum)

1)

High order bytes are ignored in the check sum.

For commands to the gauge, the following defined strings are used:

Command0

Byte No.
1
2
3

Set the unit mbar in the display
Set the unit Torr in the display
Set the unit Pa in the display
Power-failure-safe storage of current unit

3
3
3
3

16
16
16
32

2)

30

Length of data
stringPage number
StatusValue Comment

For transmission of the commands to the gauge, a string (frame) of five bytes issent (without <CR>). Byte No. 1 … 3 form the data string.

0
1
2
3
4

Admissible input strings

Function

62
62
62
62

4 2)

0
1
2
62

78
79
80
156

(2004-05)

HPG400 v1.om

Only low order byte of sum (high order byte is ignored).

tina31e1

4.6 DeviceNet Interface(HPG400-SD)

This interface allows operation of HPG400-SD with part numbers
353-527 and353-528
in connection with other devices that are suited for DeviceNet operation. The
physical interface and communication firmware of HPG400-SD comply with theDeviceNet standard (→[4], [6]).
Two adjustable switching functions are integrated in HPG400-SD. The corresponding relay contacts are available at the sensor cable connector(→ 8, 18, 34).
The basic sensor and sensor electronics of all HPG400 gauges are identical.

CautionCaution: data transmission errors
If the gauge is operated via RS232C interface and DeviceNet interface
at the same time, data transmission errors may occur.
The gauge must not be operated via RS232C interface and DeviceNetinterface at the same time.

4.6.1 Description of the
Functions

Via this interface, the following and further data are exchanged in the standardized
DeviceNet protocol (→[1]):•

Pressure reading•

Pressure unit (Torr, mbar, Pa)•

Gauge adjustment•

Status and error messages•

Status of the switching functions

4.6.2 Operating Parameters

As the DeviceNet protocol is highly complex, the parameters and programming of
HPG400-SD are described in detail in the separate Communication Protocol
(→
[1]).

4.6.2.1 Operating Software

Before the gauge is put into operation, it has to be configured for DeviceNet operation. A configuration tool and the device specific EDS file (Electronic Data
Sheet) are required for this purpose. The EDS file can be downloaded via internet
(→
[3]).

4.6.2.2 Node Address Setting

For unambiguous identification of the gauge in a DeviceNet environment, a nodeaddress is required. The node address setting is made on the gauge or programmed via DeviceNet.
Set the node address (0 … 63dec) via the "ADDRESS" "MSD"and "LSD" switches. The node address is polled by the firmware
when the gauge is switched on. If the setting deviates from thestored value, the new value is taken over into the NVRAM. If asetting higher than 63 is made, the previous node address setting remains valid.
If the „MSD“ switch is in the "P" position, the node address isprogrammable via DeviceNet (→[1]).

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31

4.6.2.3 Data Rate Setting

The admissible data rate depends on a number of factors such as system parameters and cable length (→[4], [6]) ]). It can be set on the gauge or programmed via DeviceNet.
By means of the "RATE" switch, the data rate can be set to 125("1"), 250 ("2") or 500 kBaud ("5").
If the switch is in any of the "P" positions, the data rate is programmable via DeviceNet (→[1]).

4.6.3 Status Lights"STATUS MOD"(gauge status)"STATUS NET"
(network status)

Two lights (LEDs) on the gauge inform on the gauge status and the current
DeviceNet status.

Light status

Description

Dark

No supply

Flashing
red/green

Selftest

Green

Normal operationRed

Non recoverable error

Light status
Dark−

Selftest not yet concluded−

No supply, → "STATUS MOD" light

Gauge online but no communication:

Green

Gauge online; necessary connections established

Red

32

Gauge not online:

Flashing
green

Flashing red

Electrical connections

Description−

Selftest concluded but no communication to other nodes
established−

Gauge not assigned to any masterOne or several input/output connections in "timed out" status
Communication error. The gauge has detected an error that impedes communication via the network (e.g. two identical node addresses (MAC IC) or "Bus-off")

The gauge is connected to the DeviceNet system via the 5-pin DeviceNet connector(→ 19).

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4.7 Profibus Interface(HPG400-SP)

This interface allows operation of HPG400-SP with part numbers
353-525 and353-526
in connection with other devices that are suited for Profibus operation. The physicalinterface and communication firmware of HPG400-SP comply with the Profibus
standard (→[5], [7]).
Two adjustable switching functions are integrated in the HPG400-SP. The corresponding relay contacts are available at the sensor cable connector(→ 8, 18, 34).
The basic sensor and sensor electronics of all HPG400 gauges are identical.

CautionCaution: data transmission errors
If the gauge is operated via RS232C interface and Profibus interface atthe same time, data transmission errors may occur.
The gauge must not be operated via RS232C interface and Profibus
interface at the same time.

4.7.1 Description of the
Functions

Via this interface, the following and further data are exchanged in the standardized
Profibus protocol (→[2]):•

Pressure reading•

Pressure unit (Torr, mbar, Pa)•

Gauge adjustment•

Status and error messages•

Status of the switching functions

4.7.2 Operating Parameters

As the DeviceNet protocol is highly complex, the parameters and programming of
HPG400-SP are described in detail in the separate Communication Protocol
(→
[2]).

4.7.2.1 Operating Software

For operating the gauge via Profibus, prior installation of the HPG400 specific GSD
file is required on the bus master side. This file can be downloaded via internet
(→
[3]).

4.7.2.2 Node Address Setting

For unambiguous identification of the gauge in a Profibus environment, a nodeaddress is required. The node address setting is made on the gauge.
The node address (0 … 125dec) is set in hexadecimal form
(00 … 7Dhex) via the "ADDRESS", "MSD", and "LSD" switches.
The node address is polled by the firmware when the gauge isswitched on. If the setting deviates from the stored value, thenew value is taken over into the NVRAM. If a value >7Dhex(>125dec) is entered, the node address setting currently stored in
the device remains valid but it can now be defined via Profibus("Set slave Address", →[2]).

Electrical connections

tina31e1(2004-05)

HPG400 v1.om

The gauge is connected to the Profibus via the 9-pin Profibus connector (→

20).

33

4.8 Switching Functions(HPG400-SD,
HPG400-SP)

The gauges HPG400-SD and HPG400-SP have two independent, manually adjustable switching functions. Each switching function has a floating normally open relay
contact. The relay contacts are accessible at the sensor cable connector (→ 18).
The threshold values of switching functions A and B can be set within the pressure-9range 1×10 mbar … 100 mbar via potentiometers "SETPOINT A" and"SETPOINT B" (voltage settings representing pressures >100 mbar can be set, but
the relay trigger point will remain at 100 mbar).
UThresholdt = 10 / 9 × (log pSetpoint – c) + 6

Where

U

p

c

[V]
[V]
[V]

[mbar][Pa][Torr]

02-0.125(→ Appendix A).
Measuring signal(Pressure p)s
Mea(Setpoint A, B)

alured vue

Hysteresis
10% U Threshold

U Threshold

Time tSwitching function

Off

On

Off

The hysteresis of the switching functions is 10% of the threshold setting.

4.8.1 Setting the Switching
Functions

Required tools

34

The threshold values of the two switching functions "SETPOINT A" and"SETPOINT B" are set locally on the potentiometers of the gauge that are accessible via the openings on one side of the gauge housing.

•

Voltmeter•

Ohmmeter or continuity checker•

Screwdriver, max. ø2.5 mm

tina31e1(2004-05)

HPG400 v1.om

Procedure

The procedure for setting thresholds is identical for both switching functions.

Put the gauge into operation.

Connect the + lead of a voltmeter to the threshold measurement point of theselected switching function ("Setpoint A" Pin 3, "Setpoint B" Pin 6) and
its – lead to Pin 5.
Setpoint A Pin 3
Setpoint B Pin 6

Pin 5

max. ø2.5

Using a screwdriver (max. ø2.5 mm), set the voltage of the selectedswitching function (Setpoint A, B) to the desired value UThreshold.
Setting of the switching functions is now concluded.

There is no local visual indication of the statuses of the switching functions. However, a functional check of the switching functions (On/Off)can be made with one of the following methods:

tina31e1(2004-05)

HPG400 v1.om•

Reading the status via fieldbus interface (→→[2] for HPG400-SP).

•

Measurement of the relay contacts at the sensor cable connector
with a ohmmeter/continuity checker (→ 18).

[1] for HPG400-SD,

35

5 Deinstallation
DANGER
Caution: contaminated parts
Contaminated parts can be detrimental to health and environment.
Before beginning to work, find out whether any parts are contaminated.
Adhere to the relevant regulations and take the necessary precautions
when handling contaminated parts.

CautionCaution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures toensure cleanliness and prevent damages.

Procedure
Vent the vacuum system.

Before taking the gauge out of operation, make sure that this has
no adverse effect on the vacuum system.
Depending on the programming of the superset controller, faults
may occur or error messages may be triggered.
Follow the appropriate shut-down and starting procedures.

Take gauge out of operation.

Disconnect all cables from the gauge.

Remove gauge from the vacuum system and replace the protective lid.

The gauge is now deinstalled.

36

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HPG400 v1.om

6 Maintenance, Repair
6.1 Maintenance

DANGER
Caution: contaminated parts
Contaminated parts can be detrimental to health and environment.
Before beginning to work, find out whether any parts are contaminated.
Adhere to the relevant regulations and take the necessary precautions
when handling contaminated parts.

6.2 Adjusting the Gauge

The gauge is factory-calibrated. Through the use in different climatic conditions,fitting positions, aging or contamination and after exchanging the sensor (→ 42)
a shifting of the characteristic curve can occur and readjustment can become necessary. Only the Pirani part can be adjusted.
Adjustment is necessary if•

at atmospheric pressure, the output signal is <9.75 V or the display reads< atmospheric pressure.

•when the vacuum system is vented, the output voltage reaches 9.75 V 1) before
the measured pressure has reached atmospheric pressure (gauges with display
will show the error "5" at atmospheric pressure (Pirani sensor warning → 27).

•at atmospheric pressure, the digital value of the RS232C interface is< atmospheric pressure.

•at atmospheric pressure, the digital value received by the bus controller of the
fieldbus gauges (DeviceNet or Profibus) is < atmospheric pressure.

•when the vacuum system is vented, the digital value of the RS232C interface
reaches its maximum before the measured pressure has reached atmosphericpressure.

•

when the vacuum system is vented, the digital value received by the bus controller of the fieldbus (DeviceNet or Profibus) reaches its maximum before themeasured pressure has reached atmospheric pressure.

1)

The output signal is internally limited to +10.2 V.

Adjustment procedures for HPG400-SD/-SP and HPG400 gauges differ
and will be described separately.

6.2.1 Pirani Adjustment(HPG400)

tina31e1

The following procedures are described:•

HV adjustment Pirani•

ATM adjustment Pirani

Required tools•

Pin approx. ø1.3 × 50 mm (e.g. a bent open paper clip)

HV adjustment Pirani

The Pirani part is automatically adjusted by the hot cathode part when the gauge isactivated and a pressure value of 1 … 3×10-3 mbar is reached for the first time.

(2004-05)

HPG400 v1.om

37

Pirani adjustment at
atmospheric pressure

Put the gauge into operation.

Operate the gauge for ≈10 minutes at atmospheric pressure. If
the gauge was operated within the hot cathode range, a coolingdown time of ≈30 minutes is to be expected (gauge temperature = environmental temperature).
Adjust the gauge:
HPG400 without display
353-520, 353-522

HPG400 with display
353-521, 353-523

Insert a pin (≈ø1.3×50mm) through the opening <FULL SCALE> andpush the button inside for at least 5 seconds.

_

Automatic adjustment in progress (≈10 s).

_

Adjustment completed.

6.2.2 Pirani Adjustment(HPG400-SD,
HPG400-SP)

38

The following procedures are described:•

HV adjustment Pirani•

ATM adjustment Pirani

Required tools•

Pin, approx. ø1.3 × 50 mm (e.g. abent open paper clip)

HV adjustment Pirani

The Pirani part is automatically adjusted by the hot cathode part when the gauge isactivated and a pressure value of 1 … 3×10-3 mbar is reached for the first time.

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HPG400 v1.om

Pirani adjustment at
atmospheric pressure

Put the gauge into operation.

Operate the gauge for ≈10 minutes at atmospheric pressure. If
the gauge was operated within the hot cathode range, a coolingdown time of ≈30 minutes is to be expected (gauge temperature = environmental temperature).
Insert the pin through the opening marked <FULL SCALE> and push the
button inside for at least 5 seconds.

max. ø1.3

The gauge is automatically adjusted (≈10 s).
The gauge is now adjusted at atmospheric pressure.

6.3 Adjusting theCalibration Setting of
the Hot Cathodetina31e1(2004-05)

HPG400 v1.om

The sensor is factory calibrated. The calibration setting of the hot cathode range
0 … F is printed on the label. Correct this value with the <Cal adj> switch to adjust
the electronics to the sensor. Before operating the gauge for the first time or after
replacing the sensor, check the calibration value setting and adjust it if necessary.

396.4 What to Do in Case of
Problems
Required tools / material

Troubleshooting

In the event of a fault or a complete failure of the output signal, the gauge can easily be checked.
•

Voltmeter / ohmmeter•

Allen key, size 2.5 mm•

Spare sensor (if the sensor is faulty)

The output signal is available at the sensor cable connector (Pin 2 and Pin 12).

In case of an error, it may be helpful to just turn off the supply voltage
and turn it on again after 5 seconds.
ProblemPossible cause

Correction

Output signal
permanently ≈0V

Sensor cable defective or
not correctly connected

Check the sensor cableNo supply voltage

Turn on the power supply

Gauge in an undefined
statusTurn the gauge off and on
again (reset)

Output signal ≈0.3 V(Display: error = 8)

Hot cathode error(sensor faulty)

Replace the sensor(→ 42)

Output signal ≈0.5 V(Display: error = 9)

Pirani error(sensor defective)

Replace the sensor(→ 42)

Electronics unit not
mounted correctly on
sensorCheck the connection

Internal data connection
not working

Turn the gauge off and on
again after 5 s
Replace the electronics
unit

Display:40

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HPG400 v1.om

Troubleshooting (sensor)

If the cause of a fault is suspected to be in the sensor, the following checks can bemade with an ohmmeter (the vacuum system need not be vented for this purpose).
Separate the sensor from the electronics unit (→the following measurements on the contact pins..
Ohmmeter measurement between pins

15). Using an ohmmeter, makePossible cause
≈37 Ω

4+5

>>37 Ω Pirani element 1 broken>>37 Ω Pirani element 2 broken

5+8

≈37 Ω

1 + 2/6≈0.2 Ω

2 + sensor housing∞

3 + sensor housing

∞

<< ∞

Short circuit electrode to ground

5 + sensor housing

∞

<< ∞

Short circuit electrode to ground9 + sensor housing

∞

<< ∞

Short circuit electrode to ground

2+3

∞

<< ∞

Short circuit between electrodes

2+9

∞

<< ∞

Short circuit between electrodes

3+9

∞

<< ∞

Short circuit between electrodes

2+5

∞

<< ∞

Short circuit between electrodes

3+5

∞

<< ∞

Short circuit between electrodes

5+9

∞

<< ∞

Short circuit between electrodes>>0.2 Ω Filament of hot cathode broken
Short circuit electrode to ground<<∞

View on sensor pins
9

1

8

2

7

3
6

4
5

tina31e1

1
2
6
3
7
9
4
5
8

Hot cathode (approx. 0.2 Ω)
Anode (EC)Ion collector (IC)Pirani sensor 1 (approx. 37 Ω)
Pirani sensor 2 (approx. 37 Ω)

Correction

All of the above faults can only be remedied by replacing the sensor (→Troubleshooting onfieldbus gauges(HPG400-SD, HPG400-SP)

Error diagnosis of fieldbus gauges can only be performed as described above forthe basic sensor and sensor electronics. Diagnosis of the fieldbus interface canonly be done via the superset bus controller (→[1] and [2]).
For diagnosis of the HPG400-SD (DeviceNet) gauges, the status lights might produce some useful information (→ 32).

(2004-05)

HPG400 v1.om

42).

41

6.5 Replacing the Sensor

Required tools / material

Replacement is necessary, when•

the sensor is severely contaminated.

•

the sensor is mechanically deformed.

•

the sensor is faulty, e.g. filament of hot cathode broken (→•the sensor is faulty, e.g. Pirani element broken (→•Allen key, size 2.5 mm•

Spare sensor (→

40).

40).

43)

Procedure
Deinstall the gauge (→36).

Deinstall the electronics unit from the faulty sensor and mount it to the newsensor (→ 15).
Adjust the calibration setting of the hot cathode (→Adjust the gauge (→

39).

37).

The new sensor is now installed.

42

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7 Options
Part number
24 VDC power supply / RS232C line (→21)

353-511

Controllers, power supplies, sensor cables in various lengths and a large range ofvacuum installation material can be found in the INFICON sales literature(→[10]).

8 Spare Parts
When ordering spare parts, always indicate:•

All information on the product nameplate•

Description and part number
Part number

Sensor HPG400, vacuum connection DN 25 ISO-KF(including Allen key)
Sensor HPG400, vacuum connection DN 40 CF-R
(including Allen key)354-487354-488

9 Storage
CautionCaution: vacuum component
Inappropriate storage leads to an increase of the desorption rate
and/or may result in mechanical damage of the product.
Cover the vacuum ports of the product with protective lids or grease
free aluminum foil. Do not exceed the admissible storage temperature
range (→ 11).

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43

10 Returning the Product
WARNING
Caution: forwarding contaminated productsContaminated products (e.g. radioactive, toxic, caustic or biologicalhazard) can be detrimental to health and environment.
Products returned to INFICON should preferably be free of harmful
substances. Adhere to the forwarding regulations of all involved countries and forwarding companies and enclose a duly completed declaration of contamination (→ 49).
Products that are not clearly declared as "free of harmful substances" are decontaminated at the expense of the customer.
Products not accompanied by a duly completed declaration of contamination are
returned to the sender at his own expense.

11 Disposal
DANGER
Caution: contaminated parts
Contaminated parts can be detrimental to health and environment.
Before beginning to work, find out whether any parts are contaminated.
Adhere to the relevant regulations and take the necessary precautions
when handling contaminated parts.

WARNINGN

Separating the components

44

Caution: substances detrimental to the environment
Products or parts thereof (mechanical and electric components, operating fluids etc.) can be detrimental to the environment.
Dispose of such substances in accordance with the relevant local
regulations.

After disassembling the product, separate its components according to the following criteria:

Contaminated components

Contaminated components (radioactive, toxic, caustic or biological hazard etc.)
must be decontaminated in accordance with the relevant national regulations,separated according to their materials, and disposed of.

Other components

Such components must be separated according to their materials and recycled.

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Appendix
A:

Relationship Output
Signal – Pressure
Conversion curve

Pressure p [mbar]
1E+03
1E+02

overrange

1E+01
1E+00
1E–01
1E–02
1E–03
1E–04
1E–05
1E–06

0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0 7.5 8.0 8.5 9.0 9.510.0
10.2
Measuring signal U[V]

Hot cathode range and Pirani range require different conversion formulae:

Conversion formula
hot cathode range
Conversion formula
Pirani range

U - c1

p = 10p = 10(4 × (U - c2))
Where

Changeover threshold
hot cathode ↔ Pirani

tina31e1(2004-05)

HPG400 v1.om⇔

U = c1 + log p⇔

U = c2 + 0.25 log p

U

p

c1

c2

[V]
[V]
[V]
[V]

[mbar][Torr][Micron]
[Pa]

7.5
7.625
4.625
5.5

9
9.031
8.281
8.5

Switch position<P ↔ HP>

Threshold0 or 12 or 34 or 5
6 or 7
8 or 91 mbar (factory setting)
5×10–1 mbar
2×10–1 mbar
1×10–1 mbar
5×10–2 mbar

45

Conversion table
output signal - pressure

Output signal U[V][mbar]

0 … 0.5

Underrange
-6

1.5
2.5
3.5
4.5
5.5
6.5
7.5

1.0×10
1.0×10-5
1.0×10-4
1.0×10-3
1.0×10-2
1.0×10-1
1

7.5 … 8.0

-7

1.0×10-4
1.0×10-3
1.0×10-2
1.0×10-1
1
10
100

7.5×10
7.5×10-6
7.5×10-5
7.5×10-4
7.5×10-3
7.5×10-2
7.5×10-1
Overrange

8.0 … 8.5

Underrange
-2

8.5
8.75
9.0
9.25
9.5
9.75

1.0×10
1.0×10-1
1
10
100
1000

9.75 … 10.2

-3

1
10
100
1000
10000
100000

7.5×10
7.5×10-2
7.5×10-1
7.5
75750Overrange

Gas Type Dependence

For gases other than air, the pressure can be determined by a simple conversion:

Hot cathode range(1×10-6 mbar < p < pChangeover)peff = K × pressure indicated
Where

46

[Pa]

Sensor error

0.5 … 1.5

B:

Pressure p[Torr]

Gas type

K (mean values)

Air (N2, O2)
Xe
Kr
Ar
H2
Ne
He

1.0
0.4
0.5
0.8
2.4
4.1
5.9

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Pirani range(pChangeover < p < 1000 mbar)

p (mbar)
102

H2 He

8

6
4

Ne

2

101
8
6
4

Air
N2
O2
CO
CO2
Ar

Indication range
above 10-2 mbar

Freon 12
Kr

2

Xe
100
8
6
4
2

10–1
8
6
4
2

Water vapor
10–2
10–3 24 6 810–2 2

4 6 810–1 2

4 6 8 100

2

4 6 8 101

2

4 6 8 102

peff (mbar)

A mixture of gases and vapors is often involved. In this case, accurate
determination is only possible with a partial-pressure measuring instrument.

tina31e1(2004-05)

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47

C:

48

Literature[1]

www.inficon.com
Communication Protocol
DeviceNet™ HPG400-SD (BPG400-SD)
tira03e1
INFICON AG, LI–9496 Balzers, Liechtenstein[2]

www.inficon.com
Communication Protocol
Profibus HPG400-SP (BPG400-SP)
tira36e1
INFICON AG, LI–9496 Balzers, Liechtenstein[3]

www.inficon.com
Product descriptions and downloads
INFICON AG, LI–9496 Balzers, Liechtenstein[4]

www.odva.org
Open DeviceNet Vendor Association, Inc.
DeviceNet™ Specifications[5]

www.profibus.com
Profibus user organization[6]

European Standard for DeviceNet EN 50325[7]

European Standard for Profibus EN 50170[8]

www.inficon.com
Instruction Sheet
HPG400 (all versions)
tima31e1
INFICON AG, LI–9496 Balzers, Liechtenstein[9]

www.inficon.com
Instruction Sheet
HPG400-SD, HPG400-SP
tima32e1
INFICON AG, LI–9496 Balzers, Liechtenstein[10]

www.inficon.com
INFICON AG, LI–9496 Balzers, Liechtenstein

tina31e1(2004-05)

HPG400 v1.om

Declaration of Contamination
The service, repair, and/or disposal of vacuum equipment and components will only be carried out if a correctly completed declaration has
been submitted. Non-completion will result in delay.
This declaration may only be completed (in block letters) and signed by authorized and qualified staff.

Description of productReason for return

Type
Part number
Serial number

Operating fluid(s) used (Must be drained before shipping.)

Used in copper processno

Seal product in plastic bag andmark it with a corresponding label.

yes

Process related contamination of product:

The product is free of any substances which are damaging tohealth.
yes

toxic
caustic
biological hazard
explosive
radioactive
other harmful substances

no
no
no
no
no
no

1)
1)

1)

1) or not containing any amountof hazardous residues thatexceed the permissible exposure limits

yes
yes
yes
yes
yes
yes

2)
2)
2)

2) Products thus contaminated will not be accepted without written
evidence of decontamination.

Harmful substances, gases and/or by-products
Please list all substances, gases, and by-products which the product may have come into contact with:
Trade/product name

Precautions associatedwith substanceChemical name(or symbol)

Action if human contact

Legally binding declaration:
We hereby declare that the information on this form is complete and accurate and that we will assume any further costs that may
arise. The contaminated product will be dispatched in accordance with the applicable regulations.
Organization/company
Address

Post code, place

Phone

Fax

Email
Name
Date and legally binding signatureThis form can be downloaded
from our website.

tina31e1(2004-05)

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Company stamp

Copies:Original for addresee - 1 copy for accompanying documents - 1 copy for file of sender49

Notes50

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Notestina31e1(2004-05)

HPG400 v1.om

51Original: German tina31d1 (2004-05)

t i na31e1

LI–9496 Balzers
LiechtensteinTel +423 / 388 3111
Fax +423 / 388 3700
reachus@inficon.com
www.inficon.com