SPring-8/SACLA ฼⏝◊✲ᡂᯝ㞟
2018A1598                 Section
SectionB B        BL13XU

GaN/GaInN ⷧ⭷ࡢ᱁Ꮚࡦࡎࡳ࡜ In ⤌ᡂࡢ ȝm ࣮࢜ࢲศᕸゎᯒ
Analysis of Lattice Strain and In Composition Distributionof GaN/GaInN Thin Films✄ⴥ 㞝኱, ᒣཱྀ 㞝኱, Ỉᓥ ၨ㈗, ᕤ⸨ ႐ᘯ
Yuta Inaba, Yudai Yamaguchi, Hirotaka Mizushima, Yoshihiro Kudo䝋䝙䞊ᰴᘧ఍♫Sony CorporationⓎගࢹࣂ࢖ࢫ࡟⏝࠸ࡽࢀࡿ GaN/GaInN ⷧ⭷࡛ࡣࠊIn ⤌ᡂࡴࡽࡸ᱁ᏊࡦࡎࡳศᕸࡀⓎග≉ᛶ࡟ᙳ㡪ࢆཬࡰࡍ࡜⪃࠼ࡽࢀ࡚࠸ࡿࠋࡇࡢࡇ࡜ࢆᐇ㦂ⓗ࡟᳨ドࡍࡿࡇ࡜ࢆ┠ⓗ࡜ࡋ࡚ࠊ࣐࢖ࢡࣟࣅ࣮࣒ࢆ⏝࠸ࡓ X ⥺ᅇᢡ ᐃ࡟ࡼࡿ᱁Ꮚࡦࡎࡳゎᯒ࡜⺯ග X ⥺ ᐃ࡟ࡼࡿ In ⤌ᡂゎᯒࢆ⾜ࡗࡓࠋࡑࡢ⤖ᯝࠊሙᡤ࡟ࡼࡿ In ⤌ᡂ࠾ࡼࡧ᱁Ꮚࡦࡎࡳࡢኚ໬ࡀ᫂ࡽ࠿࡟࡞ࡗࡓࠋ࣮࣮࢟࣡ࢻ㸸 ❅໬࣒࢞ࣜ࢘ࠊ㏫᱁Ꮚ࣐ࢵࣉࠊ࣐࢖ࢡࣟࣅ࣮࣒ࠊ⺯ග X ⥺ศᯒ⫼ᬒ࡜◊✲┠ⓗ㸸GaN ⣔Ⓨගࢹࣂ࢖ࢫࡢάᛶᒙ࡟ࡣ Ga1-xInxN ᒙࡀ⏝࠸ࡽࢀ࡚࠾ࡾࠊIn ⤌ᡂࢆቑࡸࡍ࡟ࡘࢀ࡚ⓎගἼ㛗ࡀ㛗Ἴ㛗໬ࡍࡿࡀࠊ୍⯡࡟Ⓨගຠ⋡ࡣపୗࡍࡿࠋࡇࡢ⌧㇟࡟ࡣࠊIn ⤌ᡂࡺࡽࡂ࡜᱁Ꮚࡦࡎࡳࡀ኱ࡁ࡞ᙳ㡪ࢆ୚࠼࡚࠸ࡿ࡜⪃࠼ࡽࢀ࡚࠸ࡿ[1]ࠋ GaN ࡜ InN ࡣ⇕ຊᏛⓗ࡟ᆒ㉁࡞ΰᬗ࡟࡞ࡾ࡟
ࡃࡃࠊIn ⤌ᡂࢆቑࡸࡍ࡯࡝┦ศ㞳ࡋࡸࡍ࠸ࡇ࡜ࡀ▱ࡽࢀ࡚࠸ࡿࡀࠊࡑࡢⓎග≉ᛶ࡬ࡢᙳ㡪ࡣ༢⣧࡛ࡣ࡞࠸ࠋ୍⯡ⓗ࡟┦ศ㞳ࡣⓎග≉ᛶࡢపୗࢆᣍࡃ࡜ᛮࢃࢀࡿࡀࠊIn ࡢ⤌ᡂࡺࡽࡂ࡟ࡼࡗ࡚࣏ࢸ
ࣥࢩࣕࣝ࡟ࡺࡽࡂࡀ⏕ࡌࠊࡑࡢᴟᑠⅬ࡟࠾࠸࡚㟁Ꮚ࣭࣮࣍ࣝࡢ෌⤖ྜⓎගࡀ㉳ࡁࡸࡍࡃ࡞ࡿ࡜࠸
࠺ࣔࢹࣝࡀᥦၐࡉࢀ࡚࠸ࡿ[2]ࠋ ࡲࡓࠊᇶᯈ࡜άᛶᒙࡢ᱁Ꮚ୙ᩚྜ࡟㉳ᅉࡍࡿ᱁Ꮚࡦࡎࡳࡶ࣏ࢸࣥࢩࣕࣝࢆኚ໬ࡉࡏࡿࠋ⤖ᬗ᱁Ꮚࡢ኱ࡁࡉࡣ In ⤌ᡂ࡟౫Ꮡࡍࡿࡓࡵࠊୖグࡢ In ⤌ᡂࡺࡽࡂ࡜᱁Ꮚࡦࡎࡳࡣᐦ᥋࡞┦㛵ࡀ࠶ࡿࠋࡇࡢࡼ࠺࡞ In ⤌ᡂࡺࡽࡂ࡜᱁Ꮚࡦࡎࡳࠊ࠾ࡼࡧⓎග≉ᛶࡢ┦㛵㛵ಀࢆゎࡁ᫂࠿ࡍࡇ࡜ࡣⓎග≉ᛶྥୖࡢᣦ㔪ࢆᚓࡿୖ࡛㔜せ࡛࠶ࡿࠋࡑࡇ࡛ࠊIn ⤌ᡂࡺࡽࡂ࡜᱁Ꮚࡦࡎࡳࠊ࠾ࡼࡧⓎග≉ᛶࡢ┦㛵㛵ಀࢆゎࡁ᫂࠿ࡍࡇ࡜ࢆ┠ⓗ࡜ࡋ࡚ࠊᨺᑕග࣐࢖ࢡࣟࣅ࣮࣒ X ⥺ࢆ⏝࠸ࡓ⺯ග X ⥺ศᯒ࡜ X ⥺ᅇᢡἲ࡟ࡼࡾࠊIn ⤌ᡂࡺࡽࡂ࡜᱁Ꮚࡦࡎࡳࡢ࣐ࢵࣆࣥࢢ ᐃࢆヨࡳࡓࠋᮏ◊✲࡛ࡣࠊᴟᛶ㠃࡛࠶ࡿ c 㠃ᇶᯈ࡜ࠊ༙ᴟᛶ㠃࡛࠶ࡿ{20-21}㠃ᇶᯈࡢヨᩱ࡟ᑐࡋ࡚ ᐃࢆ⾜࠺ணᐃ࡛࠶ࡗࡓࡀࠊ{20-21}㠃ᇶᯈ࡟ᑐࡋ࡚ᡂ⭷ࢆ⾜࠺⿦⨨ࡀᨾ㞀ࡋࠊヨᩱࡀ⏝ព࡛ࡁ࡞࠿ࡗࡓࡓࡵࠊc 㠃ᇶᯈࡢヨᩱ࡟ᑐࡋ࡚ࡢࡳ ᐃࢆ⾜ࡗࡓࠋᐇ㦂㸸ヨᩱࡣ c 㠃 GaN ᇶᯈୖ࡟ᙧᡂࡉࢀࡓ GaN ᒙࡢୖ࡟స〇ࡋࡓ༢୍㔞Ꮚ஭ᡞ(Single Quantum Well;SQW) ࡜ࡋࡓࠋSQW ࡣάᛶᒙࡢ⭷ཌࡀ 6 nm ⛬ᗘ࡛࠶ࡾࠊIn ⤌ᡂ(኱ซࡢ≺࠸⤌ᡂ)ࡣ 19%࡛࠶ࡿࠋࡇࡢヨᩱ࡟ᑐࡋ࡚஧ḟඖⓗ࡟ヨᩱࡢ఩⨨ࢆ㉮ᰝࡍࡿࡇ࡜࡟ࡼࡾࠊ⺯ග X ⥺(X-Ray Fluorescence;XRF)࡜㏫᱁Ꮚ࣐ࢵࣉࡢ஧ḟඖศᕸ ᐃ(࣐ࢵࣆࣥࢢ ᐃ)ࢆ⾜ࡗࡓࠋXRF ࣐ࢵࣆࣥࢢ࡛ࡣࠊIn-KD ⥺ࢆྲྀᚓࡍࡿࡓࡵ࡟ In-K ྾཰➃௨ୖࡢ࢚ࢿࣝࢠ࣮࡜ࡋ࡚ 30 keVࡢධᑕගࢆ⏝࠸ࠊᒅᢡࣞࣥࢬࢆ⏝࠸࡚ 2 ȝm ゅ⛬ᗘ࡟㞟ගࡋࡓࠋ㞟ගࡋࡓ X ⥺ࢆヨᩱ࡟ධᑕࡋࠊ
↷ᑕ఩⨨ࢆኚ࠼࡞ࡀࡽࠊⓎ⏕ࡋࡓ⺯ග X ⥺ࡢᙉᗘࢆ Amptek ♫〇ࡢ CdTe ᳨ฟჾ࡟࡚ ᐃࡋࡓࠋࡇࡢ࡜ࡁࠊᚋ࠿ࡽࣂࢵࢡࢢࣛ࢘ࣥࢻฎ⌮ࢆࡍࡿࡓࡵ࡟ࠊྛⅬ࡛࣐ࣝࢳࢳࣕࣥࢿࣝ࢔ࢼࣛ࢖ࢨ(MultiChannel Analyzer; MCA)ࡀฟຊࡍࡿࢫ࣌ࢡࢺࣝࢆྲྀᚓࡋࡓࠋ ᐃࡢ㝿࡟ࡣ᳨ฟჾࢆฟ᮶ࡿ㝈ࡾヨᩱ࡟㏆࡙ࡅࡿࡼ࠺࡟ࡋࠊ᭦࡟ᇶᯈ࠿ࡽࡢᙉ࠸ Ga ⺯ගࢆపῶࡍࡿࡓࡵ࡟ࠊ᳨ฟ㠃๓࡟ Al ⟩ࢆ㈞ࡾ௜
ࡅࡓࠋ࣐ࢵࣆࣥࢢ ᐃ᫬ࡢ Dead time ࡣ 15%⛬ᗘ࡛࠶ࡗࡓࠋ㏫᱁Ꮚ࣐ࢵࣉ ᐃ࡛ࡣࠊᅇᢡ X ⥺ࡢᙉᗘࢆ࡞ࡿ࡭ࡃ☜ಖࡍࡿࡓࡵ࡟ Ga-K ྾཰➃௨ୗࡢ 8 keVࡢධᑕගࢆ⏝࠸ࠊࣇࣞࢿࣝࢰ࣮ࣥࣉ࣮ࣞࢺࢆ⏝࠸࡚I1 ȝm ⛬ᗘ࡟㞟ගࡋࡓࠋ᳨ฟჾ࡟ࡣ Amsterdam䠉㻞㻣㻤䠉SPring-8/SACLA ฼⏝◊✲ᡂᯝ㞟

SectionSectionB B

Scientific Instruments ♫〇ࡢࣆࢡࢭࣝᆺ᳨ฟჾ Timepix ࢆ⏝࠸ࡓࠋࡇࡢ᳨ฟჾࡢࣆࢡࢭࣝࢧ࢖ࢬࡣ
5555 ȝm ࡛࠶ࡾࠊࣆࢡࢭࣝᩘࡣ 256256 ࡛࠶ࡿࠋⷧ࠸ SQW ⏤᮶ࡢᅇᢡᙉᗘศᕸࡢ඲యࢆᤊ࠼
ࡿࡓࡵ࡟ࠊ᳨ฟჾࡣྍ⬟࡞㝈ࡾヨᩱ࡟㏆࡙ࡅࡿࡼ࠺࡟ࡋࡓࠋ᳨ฟჾࢆ 2T࢔࣮࣒࡟⿦╔ࡋࠊࢲ࢖ࣞ
ࢡࢺࣅ࣮࣒࿘ࡾ࡛ 2T࢔࣮࣒ࢆᅇ㌿ࡉࡏ࡞ࡀࡽ⏬ീࢆྲྀᚓࡋࠊ᳨ฟჾ㠃ୖ࡛ࡢࣅ࣮࣒఩⨨ࡢኚ໬ࡼࡾ࣓࢝ࣛ㛗ࢆỴᐃࡋࡓࠋࡑࡢ⤖ᯝࠊ௒ᅇࡢ࣓࢝ࣛ㛗ࡣ 65.3 mm ࡛࠶ࡾࠊࡇࡢ࡜ࡁ࡟᳨ฟჾࡀぢ㎸ࡴ 2T ࡣ 12q⛬ᗘࠊ1 ࣆࢡࢭࣝ࠶ࡓࡾࡢ 2T ศゎ⬟ࡣ 0.05q⛬ᗘ࡛࠶ࡗࡓࠋ ᐃࡍࡿ㏫᱁ᏊⅬࡣࠊ
GaN/GaInN ࡢ 0004 ཯ᑕ࡜ࡋࡓࠋヨᩱࡢᚤᑠᅇ㌿Z ㍈ࢆ 0.05qࢫࢸࢵࣉ࡛㉮ᰝࡋ㏫᱁Ꮚ࣐ࢵࣉࢆᚓ
ࡓࠋ௨ୖࡢࡼ࠺࡞ In ⺯ග X ⥺࣭㏫᱁Ꮚ࣐ࢵࣉ ᐃࢆࠊ1 ȝm ࢫࢸࢵࣉ࡛ 810 ࡛⾜ࡗࡓࠋࡇࢀࡽࡢ࣐ࢵࣆࣥࢢ ᐃࢆྠ୍㡿ᇦ࡛⾜࠺ࡓࡵ࡟ࠊヨᩱ⾲㠃ࡢ୍㒊࡟ Pt ࢆᡂ⭷ࡋࠊ᭦࡟ࡑࡢୖ࡛཰᮰࢖࢜
ࣥࣅ࣮࣒(Focused Ion Beam; FIB)ຍᕤ࡟ࡼࡗ࡚┤ゅᙧ≧࡟ Pt ࢆྲྀࡾ㝖ࡃࡇ࡜࡛఩⨨ุᐃ⏝ࡢ࣐࣮࣮࢝ࢆసᡂࡋࡓࠋࡇࡢ࣐࣮࣮࢝௜㏆ࢆ 1 ȝm ࢫࢸࢵࣉ࡛⺯ග X ⥺࣐ࢵࣆࣥࢢࡋࠊPt-L ⥺(ධᑕ X ⥺30 keV ࡢ࡜ࡁ)ࡶࡋࡃࡣ Pt-M ⥺(ධᑕ X ⥺ 8 keV ࡢ࡜ࡁ)ࡢᙉᗘ࣐ࢵࣉࢆᥥࡃࡇ࡜࡛ࠊ࣐࣮࣮࢝ࡢ
఩⨨ࢆ≉ᐃࡋࡓࠋ࣐࣮࣮࢝➃࡛ࡢ Pt ⺯ග X ⥺ᙉᗘࣉࣟࣇ࢓࢖ࣝࡢᗈࡀࡾࡣ 1 ࢫࢸࢵࣉ⛬ᗘ࡛࠶ࡗ
ࡓࠋIn ⺯ග X ⥺࣭㏫᱁Ꮚ࣐ࢵࣉ ᐃࡢ㝿࡟ࡣࠊ࣐࣮࣮࢝ࡢ఩⨨࠿ࡽ≉ᐃࡢ㊥㞳(⦪ᶓ 50 ȝm ⛬ᗘ)ࡔࡅ㞳ࢀࡓ Pt ࡀᡂ⭷ࡉࢀ࡚࠸࡞࠸㡿ᇦࢆ࣐ࢵࣆࣥࢢࡋࡓࠋ⤖ᯝ࠾ࡼࡧ⪃ᐹ㸸ࡲࡎࠊ࣐ࢵࣆࣥࢢ ᐃࡢ࠶ࡿ㸯Ⅼ࡛ᚓࡽࢀࡓ㏫᱁Ꮚ࣐ࢵࣉ࡜ࠊࡑࡇ࠿ࡽᑟฟࡋࡓ Qz ᪉ྥࡢᅇᢡᙉᗘࡢࣛ࢖ࣥࣉࣟࣇ࢓࢖ࣝࢆᅗ 1 ࡟♧ࡍࠋࡓࡔࡋࠊ௨ୗࡢᘧࢆ⏝࠸࡚ᙉᗘ࣐ࢵࣉࡢ㍈ࢆ ᐃ࡛ᚓ
ࡽࢀࡓZ, 2T࠿ࡽ Qx, Qz ࡬࡜ኚ᥮ࡋࡓࠋʹߨሺ ሺʹߠ െ ߱ሻ െ ሺ߱ሻሻߣ
ʹߨሺሺʹߠ െ ߱ሻ ൅ ሺ߱ሻሻ
୸ ൌߣ

୶ ൌ

ᅗ 1. ࣐ࢵࣆࣥࢢ ᐃࡢ࠶ࡿ㸯Ⅼ࡛ࡢ㏫᱁Ꮚ࣐ࢵࣉ࡜ࠊ
ࡑࡇ࠿ࡽᑟฟࡋࡓࣛ࢖ࣥࣉࣟࣇ࢓࢖ࣝ࡟ᑐࡍࡿࣆ࣮ࢡࣇ࢕ࢵࢺࡢ⤖ᯝ
GaN ᇶᯈ࡜ SQW(GaInN)⏤᮶ࡢᅇᢡࣆ࣮ࢡࡀ᫂░࡟ほᐹ࡛ࡁࡿࠋ᱁Ꮚࡦࡎࡳ࡟ኚ᥮ࡍࡿࡓࡵ࡟ࠊࣛ࢖ࣥࣉࣟࣇ࢓࢖ࣝ࡟࠾࠸࡚ SQW ⏤᮶ࡢᅇᢡࣆ࣮ࢡ࡟ᑐࡋ࡚㠀⥺ᙧ᭱ᑠ஧஌ἲ࡟ࡼࡿࣇ࢕ࢵࢸ
࢕ࣥࢢࢆ⾜ࡗࡓࠋࡇࡢࣇ࢕ࢵࢸ࢕ࣥࢢ⤖ᯝ࡟ࡘ࠸࡚ࡶᅗ 1 ࡢࣛ࢖ࣥࣉࣟࣇ࢓࢖ࣝ࡟♧ࡋ࡚࠶ࡿࠋ

䠉㻞㻣㻥䠉SPring-8/SACLA ฼⏝◊✲ᡂᯝ㞟

SectionSectionB B࣐ࢵࣆࣥࢢࡢྛⅬ࡟࠾࠸࡚ࠊࣆ࣮ࢡࣇ࢕ࢵࢺ࡛ᚓࡽࢀࡓ 0004 ཯ᑕࡢࣆ࣮ࢡ఩⨨࠿ࡽ SQW ࡢ c ㍈ࡢ᱁Ꮚᐃᩘ( ୗ୕୛ )ࢆ⟬ฟࡋࠊ᭦࡟ GaN ࡢ c ㍈ࡢ᱁Ꮚᐃᩘ( ୋୟ୒ )ࢆ⏝࠸࡚ࠊ௨ୗࡢᘧ࡟ࡼࡗ࡚SQW(GaInN)ࡢ᱁Ꮚࡦࡎࡳ࡟ᑐᛂࡍࡿ㔞࡜ࡋ࡚ GaN ࡟ᑐࡍࡿ c ㍈ࡢ⭾ᙇලྜ(strain)ࢆィ⟬ࡋࡓࠋ௨ୗ࡛ࡣࠊࡇࡢ್ࢆ᱁Ꮚṍࡳ࡜࿧ࡪࡇ࡜࡟ࡍࡿࠋ ൌ ሺ ୗ୕୛ െ ୋୟ୒ ሻȀ ୋୟ୒  ൈ ͳͲͲᮏ᮶࡛࠶ࢀࡤୖグࡢ strain ࡣ GaN ࡛ࡣ࡞ࡃ↓ṍࡳࡢ GaInN ࡟ᑐࡋ࡚ィ⟬ࡍ࡭ࡁ࡛࠶ࡿࡀࠊྛ ᐃⅬ࡟࠾ࡅࡿ In ⤌ᡂࡢ⤯ᑐ್ࡀ In ⺯ග X ⥺࣐ࢵࣆࣥࢢࡢ⤖ᯝ࡜⊂❧࡟ࡣᚓࡽࢀ࡞࠸ࡇ࡜ࠊ௒ᅇࡢᐇ㦂࡛ࡣ᫬㛫ࡢไ㝈࡟ࡼࡾᑐ⛠཯ᑕࡋ࠿ ᐃࡋ࡚࠾ࡽࡎ᱁Ꮚ⦆࿴ࡢ≧ែࡀ୙࡛᫂࠶ࡿࡇ࡜ࠊGaInN ࡢ௵ពࡢ In ⤌ᡂ࡟࠾ࡅࡿ㧗⢭ᗘ࡞࣏࢔ࢯࣥẚࡀ▱ࡽࢀ࡚࠸࡞࠸ࡇ࡜ࢆ⪃࠼ࠊ᱁Ꮚṍࡳ࡟ᑐᛂࡍࡿ⡆౽࡞ᣦᶆ࡜ࡋ࡚ GaN ࡟ᑐࡍࡿ c ㍈᪉ྥࡢ᱁Ꮚࡢ⭾ᙇලྜࢆ᥇⏝ࡋࡓࠋGaN/GaInN ⣔Ⓨග⣲Ꮚࡢ᱁Ꮚṍࡳ࡟㉳ᅉࡍࡿ࣏ࢸࣥࢩࣕࣝᵓ㐀ࡢኚ໬ࡣࠊ୺࡜ࡋ࡚ c ㍈᪉ྥ࡬ࡢ⭾ᙇ࣭ఙ⦰࡟ࡼࡿࣆ࢚ࢰ㟁⏺ࡢኚ໬࡟ࡼࡿࡶࡢ࡞ࡢ࡛ࠊⓎග≉ᛶ࡜ࡢẚ㍑࡜࠸࠺㠃࡛ࡶᮏᣦᶆࡣ᭷ຠ࡜⪃࠼࡚࠸ࡿࠋ
ࡲࡓࠊࣇ࢕ࢵࢸ࢕ࣥࢢ࠿ࡽᚓࡽࢀࡓࣆ࣮ࢡ఩⨨ࡢㄗᕪ࠿ࡽ᱁Ꮚṍࡳࡢㄗᕪࢆぢ✚ࡶࡗࡓ࡜ࡇࢁࠊᐃ఩⨨࡟ࡼࡾⱝᖸࡢࡤࡽࡘࡁࡣ࠶ࡿࡶࡢࡢࠊᴫࡡ 0.005%⛬ᗘ࡛࠶ࡗࡓࠋ
ḟ࡟ࠊ⺯ග X ⥺ ᐃ࡛ᚓࡽࢀࡓ XRF ࢫ࣌ࢡࢺࣝࢆᅗ 2(a) ࡟♧ࡍࠋIn-KD⥺ࡣᙉ࠸㠀ᙎᛶᩓ஘ࡢ〈࡟஌ࡗ࡚࠸ࡿࡇ࡜ࡀศ࠿ࡿࠋࡑࡇ࡛ࠊ㠀ᙎᛶᩓ஘ࢆ Voigt 㛵ᩘ࡛ࠊࡑࡢ௚ࡢࣆ࣮ࢡࢆ Gauss 㛵ᩘ࡛ࣔࢹࣝ໬ࡋ࡚ࣇ࢕ࢵࢸ࢕ࣥࢢࡍࡿࡇ࡜࡟ࡼࡗ࡚ࣂࢵࢡࢢࣛ࢘ࣥࢻࢆ᥎ᐃࡋࠊᐇ㦂⤖ᯝ࠿ࡽᕪࡋᘬ࠸ࡓࠋࡇࡢ⤖ᯝࡢ୍౛ࢆᅗ 2(b) ࡟♧ࡋࡓࠋ

ᅗ 2. ࣐ࢵࣆࣥࢢ ᐃࡢ࠶ࡿ㸯Ⅼ࡛ࡢ XRF ࢫ࣌ࢡࢺࣝࡢ(a)඲యീࠊ
(b)In-KD௜㏆ࢆࣂࢵࢡࢢࣛ࢘ࣥࢻ㝖ཤࡋࡓ⤖ᯝ㠀ᙎᛶᩓ஘ࡢ࡞ࡔࡽ࠿࡞〈ࢆྵࡵ࡚࠺ࡲࡃࣂࢵࢡࢢࣛ࢘ࣥࢻࡀ㝖ཤ࡛ࡁ࡚࠸ࡿࡇ࡜ࡀศ࠿ࡿࠋࡇࡢࡼ࠺࡟ࡋ࡚ࣂࢵࢡࢢࣛ࢘ࣥࢻ㝖ཤࡋࡓ⤖ᯝ࠿ࡽ In-KD⥺ࡢᙉᗘࢆᢳฟࡋࡓࠋࡲࡓࠊ࣐ࢵࣆࣥࢢ ᐃ࡛ᚓࡽࢀࡓ In-KD⥺ࡢᙉᗘࡢᖹᆒ್ࡀ In ࡢ≺࠸⤌ᡂ(19%) ࡟୍⮴ࡍࡿ࡜ࡋ࡚ࠊIn ⤌ᡂ࣐ࢵࣉ࡟ኚ᥮ࡋࡓࠋࡇࡇ࡛ࠊᢳฟࡋࡓ In-KD⥺ࡢᙉᗘࡢᖹᆒ್ࡣ 4000 counts ⛬ᗘ࡛࠶ࡾࠊ࣏࢔ࢯࣥศ
ᕸࢆ௬ᐃࡋ࡚⤫ィࡺࡽࡂࢆィ⟬ࡍࡿ࡜ 1.5%⛬ᗘ࡛࠶ࡿࠋࡼࡗ࡚ࠊIn ⤌ᡂ(ᖹᆒ್ࡀ 19%)࡟᥮⟬ࡋࡓ࡜ࡁࡢㄗᕪࡣ 0.3%⛬ᗘ࡜⪃࠼ࡽࢀࡿࠋ
᭱ᚋ࡟ࠊࡇࡇࡲ࡛㏙࡭࡚ࡁࡓ᪉ἲ࡛ᑟฟࡋࡓ In ⺯ග X ⥺ᙉᗘ࠾ࡼࡧ᱁Ꮚࡦࡎࡳ࣐ࢵࣉࢆᅗ 3 ࡟♧ࡍࠋࡇࢀࡽࡢ࣐ࢵࣉࡣྠ୍఩⨨࡛ ᐃࡋࡓࡶࡢ࡛࠶ࡿࠋ䠉㻞㻤㻜䠉SPring-8/SACLA ฼⏝◊✲ᡂᯝ㞟

SectionSectionB B

ᅗ 3. In ⤌ᡂ࣐ࢵࣉ(XRF)࡜᱁Ꮚࡦࡎࡳ࣐ࢵࣉ(㏫᱁Ꮚ࣐ࢵࣉ)ࡢẚ㍑ࠋ
ᙉᗘࡢ༢఩ࡣࡑࢀࡒࢀ In ⤌ᡂ(%)࡜᱁Ꮚࡦࡎࡳ(%)࡛࠶ࡾࠊࢫࢸࢵࣉ㛫㝸ࡣ⦪ᶓ࡜ࡶ 1 ȝm ࡛࠶ࡿࠋ཮᪉࡛఩⨨࡟ࡼࡗ್࡚ࡀኚ໬ࡋ࡚࠾ࡾࠊୖ㏙ࡋࡓㄗᕪ(In ⤌ᡂ:0.3%, ᱁Ꮚṍࡳ:0.005%)௨ୖࡢᕪࡀ
࠶ࡿࡇ࡜ࡀศ࠿ࡿࠋࡓࡔࡋࠊ㸰ࡘࡢ࣐ࢵࣉ࡟༢⣧࡞┦㛵ࡣ↓࠸ࡼ࠺࡟ぢ࠼ࡿࠋ୍⯡ⓗ࡟ࡣࠊ᱁Ꮚṍࡳࡣ In ⤌ᡂࡀ㧗࠸࡯࠺ࡀ኱ࡁࡃ࡞ࡿ࡜⪃࠼ࡽࢀࡿࡀࠊ௒ᅇࡢ⤖ᯝ࠿ࡽࡣ୧⪅࡟ᚲࡎࡋࡶ᫂░࡞┦㛵ࡣㄆࡵࡽࢀ࡞࠸ࡇ࡜ࡀぢ࡚ྲྀࢀࡿࠋ௒ᚋࡢㄢ㢟㸸௒ᚋࡣࠊ௒ᅇ࣐ࢵࣆࣥࢢ ᐃࢆࡋࡓࡢ࡜ྠ୍఩⨨࡛Ⓨගᙉᗘศᕸࢆㄪ࡭ࡿࡇ࡜࡟ࡼࡗ࡚ࠊIn ⤌ᡂࠊ᱁ᏊࡦࡎࡳࠊⓎග≉ᛶࡢ┦㛵㛵ಀࢆゎࡁ᫂࠿ࡋ࡚࠸ࡃࠋࡲࡓࠊᡂ⭷⿦⨨ࡢࢺࣛࣈࣝ࡟ࡼࡾ௒ᅇ ᐃ࡛ࡁ࡞࠿ࡗࡓ༙ᴟᛶᇶᯈୖ࡟ᙧᡂࡋࡓ㔞Ꮚ஭ᡞ࡟ࡘ࠸࡚ࡶྠᵝ࡟ ᐃࡋࠊᇶᯈ㠃᪉఩㐪࠸࡟ࡼࡿኚ໬ࢆ㆟ㄽࡋࡓ࠸ࠋཧ⪃ᩥ⊩㸸
[1] I. Ho et al., Appl. Phys. Lett. 69, 2701 (1996)[2] S. F. Chichibu et al., Nature Materials 5, 810 (2006)(Received: March 15, 2019; Accepted: July 16, 2019; Published: August 29, 2019)䠉㻞㻤㻝䠉