18IPM014up.txt
受験番号：18IPM014============================================================================
問１[0002]
FIG. 1 illustrates an example of a conventional organic-material
injection nozzle. An injection nozzle 10 is connected to an outer wall 21 of achamber by using a screwing part 12 or the like.
[0003]
The chamber 20 and the injection nozzle 10 are in contact with vaporized
source material passing through an injection hole 11 during a deposition
process. Thus, the temperature of the chamber 20 and the injection nozzle 10
becomes high due to heat transmitted from the vaporized source material and thenbecomes low again when the deposition process is completed. During repeateddeposition processes, the chamber 20 and the injection nozzle 10 are repeatedly
expanded and shrunk due to repeated addition/removal of heat, which results in a
repeated load on the chamber 20 and the injection nozzle 10. The repeated load
due to addition/removal of heat may unfortunately cause looseness or a crack at
the screwing part 12 connecting the injection nozzle 10 to the outer wall 21 ofthe chamber, which may result in a small gap formed between the injection nozzle
10 and the outer wall 21 of the chamber.
[0004]Such damage caused at a connection part between an injection nozzle anda chamber leaks vaporized source material inside the chamber through the damaged
part. Thus, high-cost source material is lost, and also the leaked source
material causes a problem of contamination on areas other than a substrate.
問２[0010]
FIG. 1 is a sectional view illustrating a porous plastic bearing
according to a first embodiment, and FIG. 2 is a sectional view taken along theline II-II of FIG. 1. The drawings illustrate a shaft 1 (rotary shaft) and asliding bearing 2 that supports the shaft 1 rotatably and is made of a porous
plastic. The sliding bearing 2 includes an aggregated sintered body ofacrylonitrile-butadiene-styrene (ABS) resin made plastic particles 3 and liquid
lubricant 4 impregnated in the aggregated sintered body. Through holes 3aexisting between the plastic particles 3, the liquid lubricant 4 flows. Theliquid lubricant 4 also oozes out to the inner surface of the sliding bearing 2
from the holes 3a.
[0011]
More specifically, the sliding bearing 2 is formed by aggregating many
(more than one) plastic particles 3 each having a volume of 0.004 to 4 cubic
millimeter, and sintering the aggregation of the plastic particles 3 having aporosity of 10 to 30%.
[0012]
Rotation of the shaft 1 generates negative pressure on an anti-load side
between the shaft 1 and the inner surface of the sliding bearing 2. Thus, theliquid lubricant 4 impregnated between the plastic particles 3 of the sliding
bearing 2 oozes out to the inner surface of the sliding bearing 2 and reaches aload part of the inner surface of the sliding bearing 2 that is closest to theshaft 1, generating positive pressure at the load part, thereby preventing
contact between the shaft 1 and the sliding bearing 2. Therefore, the friction
resistance between the shaft 1 and the sliding bearing 2 is reduced.
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18IPM014up.txt
問３
（１）
1.

stepの語を使用するクレーム
A method of manufacturing a gear, the method comprising:a gear processing step of machining steel material so as to form a gear
having a predetermined shape; anda quenching step of quenching the gear by heating the formed gear up toaustenite region and then rapidly cooling the gear down to martensite region in
an atmosphere containing carbonizing gas and ammonia gas,
wherein the quenching step includes a step of adjusting a volume
percentage of a remaining austenite volume on the outermost surface of the gear
including a tooth surface to 40 to 80 v/v%.
（２）
1.

stepの語を使用しないクレーム
A method of manufacturing a gear, the method comprising:forming a gear having a predetermined shape by machining steel material;

andquenching the gear by heating the formed gear up to austenite region andthe rapidly cooling the gear down to martensite region in an atmosphere
containing carbonizing gas and ammonia gas,
wherein during quenching the gear, a volume percentage of a remaining
austenite volume on the outermost surface of the gear including a tooth surface
is adjusted to 40 to 80 v/v%.

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