Pirani Gauge

SafetyTechnical Data

Symbols Used

Measurement principle

DANGER

TPR018

Information on preventing any kind of physical injury.

WARNING

Display range(air, O2, CO, N2)
Measurement range(air, O2, CO, N2)
Accuracy
At room temperature andcable length <20 m
At 0 … +70 °C and within
the entire range of specified cable length

Information on preventing extensive equipment and environmental damage.

Within the entire specified
range of temperatures andcable lengthCaution
Information on correct handling or use. Disregard can leadto malfunctions or minor equipment damage.

Personnel Qualifications
Operating ManualIncl. EU Declaration of Conformity

IG9976BEN(2017-09)

Product Identification
In all communications with INFICON, please specify the information given on the product nameplate. For convenient
reference copy that information into the space provided below.

Skilled personnel
All work described in this document may only be carriedout by persons who have suitable technical training and thenecessary experience or who have been instructed by theend-user of the product.

General Safety Instructions• Adhere to the applicable regulations and take the necessary precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of theprocess media due to the heat generated by the product.
• Adhere to the applicable regulations and take the necessary precautions for all work you are going to do andconsider the safety instructions in this document.
• Before beginning to work, find out whether any vacuum
components are contaminated. Adhere to the relevant
regulations and take the necessary precautions whenhandling contaminated parts.
Communicate the safety instructions to all other users.

Repeatability with airMaterials
Internal seal
Insulator
Filament / filament holder
Chamber wall, housing
feedthroughRadiation resistancePressure deviation due toexternal magnetic field
10-2 mbar
1 mbar
102 mbar
Overpressure
Cable length
Gauge - controller

Admissible Temperatures
Operationwith high-temperature
sensor cablewith standard sensor
cable
Bakeout
Filament
Storage

Liability and Warranty
INFICON assumes no liability and the warranty becomes nulland void if the end-user or third parties• disregard the information in this document• use the product in a non-conforming manner

ValidityThis document applies to products with the following partnumbers:
IOG15020
IOG15024(DN 16 ISO-KF)(DN 40 CF-F)

The part number (PN) can be taken from the product nameplate.

• make any kind of changes (modifications, alterations etc.)
to the product

Relative humidity

Mounting orientation(recommendation)Use• use the product with accessories not listed in the productdocumentation.

Protection category

The end-user assumes the responsibility in conjunction withthe process media used.
Gauge failures due to contamination or wear and tear, as
well as expendable parts (filament), are not covered by thewarranty.

Dimensions [mm]thermal conductance according to Pirani
5×10-4 … 1000 mbar
1×10-2 … 100 mbar≈±20% of reading in therange of 1×10-2 … 100 mbar

Indicated pressure (gauge calibrated for air)p (mbar)Vacuum Connection

102

H2 He Ne

864
2

101

Indication range
above 10-2 mbar

AirO2CON2DANGER
CO2ArFreon 12Kr2Xe

100
864
210–1

≈±35% of reading in therange of 1×10-2 … 100 mbar≈±5% of reading in therange of 1×10-2 … 100 mbar

DANGER: overpressure in the vacuum system>1 barInjury caused by released parts and harmcaused by escaping process gases can result if
clamps are opened while the vacuum system ispressurized.
Do not open any clamps while the vacuum system is pressurized. Use the type clamps which
are suited to overpressure.

8642

10–2

Watervapor

DANGER

8642Al, Ni90
Al2O3, NiFeCo
W / Ni

10–3
10–3 2

1.4435, 1.4306

Calibration factors for pressure range below 1 mbar

4 6 10–2 2

4 6 10–1 2

4 6 100 2

4 6 101 2

4 6102peff (mbar)

1×104 GyDANGER: overpressure in the vacuum system>2.5 bar
KF flange connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures.
Process media can thus leak and possibly
damage your health.
Use O-rings provided with an outer centeringring.

peff = C × indicated pressure
DANGER

up to 480 mT: <5%
up to 300 mT: <2.5%
always positive≤9 bar (limited to inertgases)
depending on the measurement unit

GastypeCalibration
factor C

Gas type

Calibration
factor CHeNeArKrXe

0.8
1.4
1.7
2.43.0H2air, O2, CO, N2
CO2
water vapour
Freon 120.5
1.0
0.9
0.5
0.7

DANGER: protective ground
Incorrectly grounded products can be extremely
hazardous in the event of a fault.
The gauge must be electrically connected to thegrounded vacuum chamber. This connection
must conform to the requirements of a protective
connection according to EN 61010:

Keep the protective lid.

Electrical Connection
Make sure the vacuum connection is properly
made.
• The TPG300 control unit must be turned off
before any work is performed on the gauge orsensor cable.
• Wait at least 15 seconds after turning off, before
connecting cable.
The gauge is connected to the controller via a measurement
cable (→ "Accessories").

• CF connection fulfill this requirement• For gauges with a KF flange, use a conductive metallic clamping ring

Caution0 … +120 °C (with TPG300)
0 … +80 °C (with TPG300)+250 °C 1)
ambient temperature+130 °C–40 … +80 °C≤80% at temperatures≤+31 °C, decreasing to 50%
at +40 °Caligned with the magnetic
fieldindoors only
altitudes up to 2000 m NN
IP 40

Caution: vacuum component
Dirt and damages impair the function of thevacuum component.
When handling vacuum components, take appropriate measures to ensure cleanliness andprevent damages.

CautionCaution: dirt sensitive area
Touching the product or parts thereof with barehands increases the desorption rate.
Always wear clean, lint-free gloves and use
clean tools when working in this area.

To keep condensates and particles from getting into
the measuring chamber preferably choose ahorizontal to upright position.
We recommend mounting the gauge aligned withthe magnetic field.

ISO-KF flange

Intended Use
The Pirani Gauge TPR018 has been designed for vacuum
measurement of gases in the display range of5×10-4 … 1000 mbar.
It must not be used for measuring flammable or combustible
gases in mixtures containing oxidants (e.g. atmospheric oxygen) within the explosion range.
The gauge can be operated in connection with an INFICON
TPG300 total pressure gauge controller.

Installation864≈±10% of reading in therange of 1×10-2 … 100 mbar

CF-F flange

Gas Type Dependence

Weight
DN 16 ISO-KF
DN 40 CF-F

0.6 kg0.85 kg

Keep the protective lid.

i g9976ben1)

With high-temperature cable or without cable

Original: English(2017-09)

Operation

Deinstallation

Maintenance, Troubleshooting

After connection the gauge is ready for operation.
When the gauge is operated for the first time, a zeroadjustment should be performed.
It is advisable to operate the gauge continuously, irrespectiveof the pressure.
If the diaphragm is removed in order to achieve shorter response times, sudden pressure changes should be avoided
in order to protect the filament.
Measurement cables influence the accuracy ofmeasurement. If cables with lengths over 20 m areused, we strongly recommend adjusting the gauge
together with the cable. For details refer to theoperating instructions of the correspondingcontroller.

Adjustment
The gauge is factory calibrated. For most applications, itneeds to be realigned. This allows to correct measurement
errors caused by spread between units, temperature and theinfluence of the cable length. The gauge is aligned according
to the operating instructions of the measurement unit used.
For adjusting the gauge, operate the gauge under the sameambient conditions and in the same mounting orientation as
normally.

Gas Type Dependence
The measurement value is gas dependent. The reading
applies to dry air, N2, O2 and CO. For other gases, it has tobe converted (→ Technical Data and operating instructions ofthe corresponding controller).
In the pressure range below 1 mbar this can be done by entering the corresponding calibration factor on the controller(→ Operating Manual of the corresponding controller).

DANGERDANGER: contaminated parts
Contaminated parts can be detrimental to healthand environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.

CautionCaution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to ensure cleanliness andprevent damages.

CautionCaution: dirt sensitive area
Touching the product or parts thereof with barehands increases the desorption rate.
Always wear clean, lint-free gloves and use
clean tools when working in this area.

 Turn off the TPG300 control unit.
Wait at least 15 seconds after turning off,
before disconnecting cable.

 Vent the vacuum system and disconnect the sensor
cable from the gauge.

 Remove gauge from the vacuum system and install theprotective lid.

Gauge failures due to contamination or wear andtear, as well as expendable parts (filament), are notcovered by the warranty.

Troubleshooting

Storage

Fault

Possible cause

RemedyPressure readings
supplied by gauge
too high

Gauge contaminatedMinor deviations
can be compensated by realignment at the measurement unit

Realignment at the measurement unit can become
necessary in the following events:• Altering

Clean the gauge
No useful indication• Contamination• After cleaning

Cleaning

Filament broken(an unbroken filament has a resistance of ≈100 Ω

Replace the gauge

Gauge cable defective, interrupted, or shortcircuit

Repair or replace
the cable

EU Declaration of Conformity

Caution: vacuum component
Inappropriate storage leads to an increase of thedesorption rate and/or may result in mechanicaldamage of the product.
Cover the vacuum ports of the product withprotective lids or grease free aluminum foil. Donot exceed the admissible storage temperaturerange (→  "Technical Data")

CautionPrecondition: Gauge deinstalled Clean or replace the diaphragm.

• 2011/65/EU, OJ L 174/88, 1.7.2011(RoHS Directive; directive on the restriction of
the use of certain hazardous substances inelectrical and electronic equipment)(Operation with TPG300)

Returning the ProductStandards

Accessories

WARNING
Ordering No.
3m
10 m
15 m
20 m
25 m
30 m
35 m
40 m
45 m
50 m

ITC548308
ITC548456
ITC548457
ITC548458
ITC548459
ITC548460
ITC548461
ITC548462
ITC548463
ITC548464
Ordering No.

CautionCaution: dirt sensitive area
Touching the product or parts thereof with barehands increases the desorption rate.
Always wear clean, lint-free gloves and use
clean tools when working in this area.

(EMC Directive; directive relating to electromagnetic compatibility)

TPR018

Standard sensor cable, 80 °C

Caution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to ensure cleanliness andprevent damages.

• 2014/30/EU, OJ L 96/79, 29.3.2014

ProductDANGERDANGER: contaminated parts
Contaminated parts can be detrimental to healthand environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.

We, INFICON, hereby declare that the equipment mentioned below complies with the provisions of the following directive:

CautionHigh-temperature sensor cable, 250 °C
3m
5m
10 m
15 m
20 m
25 m
30 m
35 m
40 m
45 m
50 m

ITC548414
ITC548465
ITC448047
ITC448043
ITC448044
ITC120025
ITC120030
ITC120035
ITC120040
ITC120045
ITC120050WARNING: forwarding contaminated productsContaminated products (e.g. radioactive, toxic,caustic or microbiological hazard) can be detrimental to health and environment.
Products returned to INFICON should preferably
be free of harmful substances. Adhere to theforwarding regulations of all involved countries
and forwarding companies and enclose a duly
completed declaration of contamination (formunder www.inficon.com).
Products that are not clearly declared as "free of harmfulsubstances" are decontaminated at the expense of thecustomer.
Products not accompanied by a duly completed declarationof contamination are returned to the sender at his ownexpense.

DisposalHarmonized and international/national standards and specifications:• EN 61000-6-2:2005(EMC: generic immunity standard)• EN 61000-6-3:2007 + A1:2011(EMC: generic emission standard)• EN 61010-1:2010(Safety requirements for electrical equipment for measurement,control and laboratory use)

• EN 61326-1:2013; Group 1, Class B(EMC requirements for electrical equipment for measurement,control and laboratory use)

Manufacturer / Signatures
INFICON AG, Alte Landstraße 6, LI-9496 Balzers
31 August 201731 August 2017

Dr. Bernhard Andreaus
Director Product Evolution

Markus Truniger
Product Manager

DANGERDANGER: contaminated parts
Contaminated parts can be detrimental to healthand environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.

Diaphragm

 Clean the gauge / replace parts (→ "Spare Parts").
DANGERDANGER: cleaning agents
Cleaning agents can be detrimental tohealth and environment.
Adhere to the relevant regulations andtake the necessary precautions when handling and disposing of cleaning agents.
Consider possible reactions with the product materials (see "Technical data").

• Fill the measurement chamber with a solvent andallow it to work for some time. Repeat this procedure if necessary.
• Pour the solvent out.
• Rinse the vacuum chamber and the filter with alcohol for several times in order to remove all solvent
residues.

WARNINGWARNING: substances detrimental to the environment
Products or parts thereof (mechanical and electric components, operating fluids etc.) can be detrimental to the environment.
Dispose of such substances in accordance withthe relevant local regulations.

Separating the components
After disassembling the product, separate its components
according to the following criteria:• Contaminated components
Contaminated components (radioactive, toxic, caustic, or
biological hazard etc.) must be decontaminated in accordance with the relevant national regulations, separated
according to their materials, and recycled.
• Other components
Such components must be separated according to theirmaterials and recycled.

• Dry at ≈70 °C.

 Insert the diaphragm.
LI–9496 Balzers
LiechtensteinTel +423 / 388 3111
Fax +423 / 388 3700
reachus@inficon.com
www.inficon.com