SPring-8/SACLA ฼⏝◊✲ᡂᯝ㞟Section
Section B

%                             %/;8ࡑࡢሙ X ⥺ᅇᢡ ᐃࢆ⏝࠸ࡓGaAs(001)ᇶ
ᇶᯈୖ InGaAs ᡂ㛗࡟࠾ࡅࡿ In ೫ᯒࡢゎᯒ
Real-Time Observation of In Segregation During InGaAs Growth onGaAs(001) by X-ray Diffraction㕥ᮌ ⚽ಇ a, బࠎᮌ ᣅ⏕ b, 㧗ᶫ ṇග b, ኱ୗ ⚈㞝 c
Hidetoshi Suzukia, Takuo Sasakib, Masamitu Takahasib, Yoshio Ohshitacaᐑᓮ኱Ꮫ, b 㔞Ꮚ⛉Ꮫᢏ⾡◊✲㛤Ⓨᶵᵓ, c ㇏⏣ᕤᴗ኱Ꮫ a Miyazaki University, bQST, cToyota Technological InstituteศᏊ⥺࢚ࣆࢱ࢟ࢩ࣮ἲࢆ⏝࠸ࡓ GaAs(001)ᇶᯈୖ࡬ࡢ InGaAs ⷧ⭷ᡂ㛗୰ࡢ In ೫ᯒ㐣⛬ࡢゎ᫂ࢆ┠ᣦࡋࠊᨺᑕගࢆ⏝࠸ࡓ X ⥺ᅇᢡἲࢆ⏝࠸࡚ࣜ࢔ࣝࢱ࢖࣒ ᐃࢆ⾜ࡗࡓࠋᅇᢡᙉᗘィ⟬࡜ᐇ㦂⤖ᯝ࡜ࡢẚ㍑࠿ࡽࠊᡂ㛗୰ࡢ⭷୰ࡢ In ศᕸࡢኚ໬ࢆ⟬ฟࡋࠊྛ᫬Ⅼ࡛ࡢ೫ᯒಀᩘࢆぢ✚ࡶࡗࡓࠋᡂ㛗㏿ᗘࡀ᪩࠸ሙྜࡣ(0.20, 0.27 ML/s)ࠊ୍ࡘࡢ೫ᯒಀᩘ࡛ィ⟬⤖ᯝ࡜ᐇ㦂⤖ᯝࡀ୍⮴ࡋࡓࡀࠊᡂ
㛗㏿ᗘࡀ㐜࠸ሙྜ(0.10 ML/s)࡛ࡣ୍ࡘࡢ೫ᯒಀᩘ࡛ㄝ᫂ࡍࡿࡇ࡜ࡀ୙ྍ⬟࡛࠶ࡗࡓࠋࡇࡢ⤖ᯝࡣࠊ≉࡟ᡂ㛗㏿ᗘࡀ㐜࠸ሙྜ࡟࠾࠸࡚ࠊࡇࢀࡲ࡛ࡢ೫ᯒࣔࢹࣝࢆಟṇࡍࡿᚲせࢆ♧၀ࡋ࡚࠸ࡿࠋ
࣮࣮࢟࣡ࢻ㸸 ࣊ࢸ࢚ࣟࣆࢱ࢟ࢩ࣮ࠊ⾲㠃೫ᯒࠊInGaAsࠊࣜ࢔ࣝࢱ࢖࣒ ᐃ⫼ᬒ࡜◊✲┠ⓗ㸸༙ᑟయΰᬗࡢ࢚ࣆࢱ࢟ࢩࣕࣝᡂ㛗࡟࠾ࡅࡿ⾲㠃೫ᯒࡣࠊᛴᓧ࡞࣊ࢸࣟ⏺㠃ࢆᐇ⌧ࡋࠊ㔞Ꮚ஭ᡞࢆᐇ⌧ࡍࡿࡓࡵ࡟㔜せ࡛࠶ࡿࠋࡇࢀࡲ࡛࡟ከࡃࡢ⾲㠃೫ᯒ࡟㛵ࡍࡿ◊✲ࡀ⾜ࢃࢀ࡚ࡁ࡚࠸ࡿࡀࠊࡲࡔ༑ศ࡟⌮ゎࡉࢀ࡚࠸࡞࠸Ⅼࡀ࠶ࡿ[1-3]ࠋMuraki ➼ࡣ InGaAs/GaAs(001)࡟࠾࠸࡚ࠊ㸰ḟ࢖࢜ࣥ㉁㔞ศᯒࢆ⏝࠸࡚ᡂ㛗ᚋࡢⷧ⭷ࡢ In ศᕸࢆほᐹࡋࠊIn ೫ᯒࢆࣔࢹࣝ໬ࡋ࡚࠸ࡿ[3]ࡀࠊᡂ㛗ᚋࡢほᐹ࡛࠶ࡿࠋ୍᪉ࠊࣜ࢔ࣝࢱ࢖࣒ ᐃᡭἲ࡜ࡋ࡚ࠊ㟁Ꮚ⥺ᅇᢡἲࡀ⏝࠸ࡽࢀ࡚࠸ࡿ[2]ࡀࠊࡇࡢᡭἲ
࡛ࡣ᭱⾲㠃㏆ഐࡢ᝟ሗࡋ࠿ᚓࡿࡇ࡜ࡀ࡛ࡁ࡞࠸ࠋ೫ᯒࡣ᭱⾲㠃ࡔࡅ࡛࡞ࡃࠊࡑࡢୗࡢᒙ࡛ࡶⓎ⏕ࡍࡿྍ⬟ᛶࡀ࠶ࡿࠋࡋࡓࡀࡗ࡚ࠊࡼࡾヲ⣽࡟೫ᯒ㐣⛬ࢆ᫂ࡽ࠿࡟ࡍࡿࡓࡵ࡟ࡣࠊᡂ㛗୰ࡢࣜ࢔ࣝࢱ࢖࣒ ᐃ࡜ࠊ೫ᯒ࡟ࡼࡿෆ㒊ࡢ⤌ᡂኚ໬ࡢほᐹࡀᚲせ୙ྍḞ࡛࠶ࡿࠋᡃࠎࡣࡇࢀࡲ࡛࡟ࠊ୺࡟᱁Ꮚ
୙ᩚྜᮦᩱࡢ࢚ࣆࢱ࢟ࢩࣕࣝᡂ㛗ࡍࡿ㝿ࡢ᱁Ꮚ୙ᩚྜ㌿఩ࡢ⏕ᡂ㐣⛬ࢆ᫂ࡽ࠿࡟ࡍࡿࡓࡵࠊᨺᑕගࢆ⏝࠸ࡓ X ⥺ᅇᢡἲ࡟ࡼࡾࠊศᏊ⥺࢚ࣆࢱ࢟ࢩ࣮(MBE)ἲࢆ⏝࠸ࡓ GaAs ᇶᯈୖ࡬ࡢ InGaAs ⷧ⭷ᡂ㛗୰ࡢࣜ࢔ࣝࢱ࢖࣒ ᐃࢆ⾜ࡗ࡚ࡁࡓ[5,6]ࠋࡇࡢ୰࡛ࠊ㌿఩ᙧᡂ࡟ࡼࡿᅇᢡࣆ࣮ࢡࡢኚ໬࡟ຍ
࠼࡚ࠊIn ೫ᯒࡢᙳ㡪࡜ᛮࢃࢀࡿᅇᢡࣆ࣮ࢡࡢኚ໬ࢆほᐹࡋ࡚࠸ࡿ[5]ࠋX ⥺ࡣ㟁Ꮚ⥺࡜␗࡞ࡾ⤖ᬗෆ㒊ࡲ࡛㏱㐣ࡍࡿࡓࡵࠊⷧ⭷⾲㠃ࡔࡅ࡛࡞ࡃෆ㒊ࡶྵࡵ࡚೫ᯒࡢ≧ἣࢆࣜ࢔ࣝࢱ࢖࣒ ᐃ࡛ࡁࡿࡇ࡜ࡀᮇᚅࡉࢀࡿࠋ
ᮏሗ࿌࡛ࡣࠊMBE ἲ࡟ࡼࡿ GaAs ᇶᯈୖ࡬ࡢ InGaAs ᡂ㛗࡟࠾ࡅࡿ In ࡢ⾲㠃೫ᯒ㐣⛬ࢆࠊෆ㒊ࡢ In ⤌ᡂࡢኚ໬࠿ࡽᨺᑕගࢆ⏝࠸ࡓࣜ࢔ࣝࢱ࢖࣒ ᐃ࡟ࡼࡾ᫂ࡽ࠿࡟ࡍࡿࡇ࡜ࢆ┠ⓗ࡜ࡍࡿࠋᐇ㦂㸸
ᐇ㦂ࡣࠊSPring-8 ࡢ BL11XU ࡟⨨࠸࡚ࠊMBE ⿦⨨࡜ X ⥺ᅇᢡィࡀ୍య໬ࡋࡓ⿦⨨ࢆ⏝࠸࡚⾜ࡗࡓ[4]ࠋMBE ἲࢆ⏝࠸࡚ࠊInxGa1–xAs ⷧ⭷ࢆ GaAs(001)ᇶᯈୖ࡟ᡂ㛗ࡋࠊᡂ㛗୰࡟ࣜ࢔ࣝࢱ࢖࣒࡛
004 ㏫᱁ᏊⅬ㏆ഐࡢ XRD ࣃࢱ࣮ࣥࢆ ᐃࡋࡓࠋInGaAs ࡢᡂ㛗㏿ᗘࢆ 0.10ࠊ0.20ࠊ0.27 ML/s ࡜ኚ໬ࡉࡏࡓࠋIn ⤌ᡂ࠾ࡼࡧᡂ㛗 ᗘࡣࡑࢀࡒࢀ 0.11 ± 0.02 ࡜ 450ºC ࡜ࡋࡓࠋInGaAs ᡂ㛗୰ࡢ GaAs
ᇶᯈ࡟ࠊMBE ⿦⨨ࡢ Be ❆ࢆ⤒⏤ࡋ࡚࠿ࡽ X ⥺ࢆධᑕࡋࠊᅇᢡἼࡢ᳨ฟ࡟ࡣ㸰ḟඖ CCD ࣓࢝ࣛࢆ⏝࠸ࡓࠋᇶᯈ࡬ࡢධᑕゅᗘ࠾ࡼࡧධᑕ X ⥺࡜᳨ฟჾࡢ࡞ࡍゅࢆࡑࢀࡒࢀ GaAs004 ࡢ Bragg ᅇᢡࢆ୰ᚰ࡟ࡑࢀࡒࢀ 0.7 ࠾ࡼࡧ 1.6º ࡢ⠊ᅖ࡛ኚ໬ࡉࡏ࡚ 80 ᯛࡢ㸰ḟඖ⏬ീࢆ ᐃࡋࠊ㏫᱁Ꮚ✵㛫୰ࡢ
004 ㏆ഐࡢ㏫᱁Ꮚ࣐ࢵࣆࣥࢢࢆ ᐃࡋࡓࠋ1 ᅇࡢ㏫᱁Ꮚ࣐ࢵࣆࣥࢢ ᐃ࡟ᚲせ࡞᫬㛫ࡣ⣙ 100 ⛊࡛࠶ࡗࡓࠋࡇࡢ ᐃࢆ InxGa1–xAs ⷧ⭷ᡂ㛗୰࡟㐃⥆ࡋ࡚⾜࠺ࡇ࡜࡟ࡼࡾࠊ⭷ཌኚ໬࡟క࠺ኚ໬ࢆࣜ࢔
ࣝࢱ࢖࣒࡛ ᐃࡋࡓࠋ ᐃ࡟౑⏝ࡋࡓ X ⥺ࡢἼ㛗ࡣ 0.8270ύࠊࣅ࣮࣒ࢧ࢖ࢬࡣ 0.30.1 mm2 ࡛࠶
ࡗࡓࠋ

䠉㻞㻜㻤䠉

SPring-8/SACLA ฼⏝◊✲ᡂᯝ㞟

SectionSection B⤖ᯝ࠾ࡼࡧ⪃ᐹ㸸ᡂ㛗୰࡟ ᐃࡋࡓ InGaAs ᒙ࠿ࡽࡢ XRD ࣃࢱ࣮ࣥ࡟㛵ࡋ࡚ࠊ⭷ཌ࡟ᑐࡍࡿ඾ᆺⓗ࡞ኚ໬౛ࢆᅗ
1 ࡟♧ࡍࠋᶓ㍈ࡣ GaAs ࡢ 004 ㏫᱁ᏊⅬࢆᇶ‽࡟ࠊ㏫᱁Ꮚ✵㛫୰ࡢᡂ㛗᪉ྥ([001]᪉ྥ)࡟ἢࡗ࡚ᙉ
ᗘศᕸࢆࣉࣟࢵࢺࡋ࡚࠸ࡿࠋࡇࡇ࡛ࠊᡂ㛗㏿ᗘࡣ 0.10 ML/s ࡛࠶ࡿࠋ⭷ཌࡀⷧ࠸࡜ࠊIn ࡢ⾲㠃೫ᯒ࡟ࡼࡾ⭷୰ࡢ In ⤌ᡂࡀᑠࡉࡃ GaAs ᇶᯈࡢࣆ࣮ࢡ఩⨨(L/4=1)࡟㏆࠸ࠋ⭷ཌࡀቑຍࡍࡿ࡟ᚑ࠸ In ⤌ᡂࡀቑຍࡋࠊࣆ࣮ࢡ఩⨨ࡀᕥഃ࡟ࢩࣇࢺࡍࡿࠋ⭷ཌ 122 ML ࡛ࡣࠊཌࡉ࡟㉳ᅉࡍࡿࣇࣜࣥࢪࣆ࣮ࢡ
ࡀ࣓࢖ࣥࣆ࣮ࢡࡢᕥྑ࡟ほᐹࡉࢀࡿࠋࡓࡔࡋࠊᕥྑࡢࣇࣜࣥࢪࣆ࣮ࢡᙉᗘ࡟㐪࠸ࡀぢࡽࢀࡿࠋࡇࢀ
ࡣࠊIn ೫ᯒ࡟ࡼࡾ⭷୰ࡢ In ⤌ᡂࡀ⦆ࡸ࠿࡟ኚ໬ࡋ୙ᆒ୍࡟࡞ࡗ࡚࠸ࡿᙳ㡪ࡔ࡜⪃࠼ࡽࢀࡿࠋࡑࡇ
࡛ࠊIn ศᕸࢆ௬ᐃࡋィ⟬ࡋࡓࠊXRD ࣃࢱ࣮ࣥ࡜ẚ㍑ࢆ⾜ࡗࡓࠋᅗ 1. GaAs(001)ᇶᯈୖ࡬ࡢ InGaAs ⷧ⭷ᡂ㛗୰࡟ᚓࡓ InGaAs 004 ᅇᢡⅬ㏆ഐࡢ
XRD ࣃࢱ࣮ࣥࠋᡂ㛗 ᗘ 450ºCࠊᡂ㛗㏿ᗘ 0.10 ML/sࠋィ⟬࡟⏝࠸ࡓࣔࢹࣝࢆ௨ୗ࡟グ㏙ࡍࡿࠋIn ศᕸ࡜ࡋ࡚ Muraki ➼ࡢ೫ᯒࣔࢹࣝࢆ⏝࠸ࡓࠋࡲࡎࠊ
ᇶᯈ࠿ࡽ k ᒙࡢཎᏊᒙࡢᡂ㛗ࡀ⤊஢ࡋࠊk+1 ᒙ┠ࡀᡂ㛗ࡋ࡚࠸ࡿ࡜ࡁࢆ⪃࠼ࡿࠋࡇࡢ࡜ࡁ᭱⾲㠃࡟
In ࡢᾋ㐟ᒙࡀ࠶ࡿ࡜௬ᐃࡋࠊࡑࡢ In ⤌ᡂࢆ FIk ࡜ࡍࡿࠋ౪⤥᫬ࡢ III ᪘୰ࡢ In ࡢ๭ྜࢆ x0ࠊᡂ㛗᫬ࡢ೫ᯒಀᩘࢆ R ࡜ࡍࡿ࡜ࠊk+1 ᒙ┠ࡢᡂ㛗ࡀ⤊஢ࡋࡓ᫬Ⅼ࡛ࠊk+1 ᒙ┠ࡢ In ⤌ᡂࡣ xk+1=FIk (1–R)ࠊk+1 ᒙ┠ࡢୖࡢᾋ㐟 In ᒙࡢ⤌ᡂ FIk+1 = FIkR + x0 ࡜࡞ࡿࠋ㸯ᒙ┠ᡂ㛗୰ࡢᾋ㐟 In ࡢ⤌ᡂ FI0 = 0࡜ࡋ࡚ࠊn ᒙ┠ࡢ In ⤌ᡂ(xn)ࢆぢ✚ࡶࡿ࡜௨ୗࡢࡼ࠺࡟࡞ࡿࠋ‫ݔ‬௡ ൌ ‫ݔ‬଴ ሺͳ െ ܴ ௡ ሻ(1)In ⤌ᡂ࠿ࡽྛᒙࡢ㠃㛫㝸(dn)ࢆ࣮࣋࢞ࢻ๎࡜ᙎᛶṍࡳࢆ⏝࠸࡚⟬ฟࡋࠊ௨ୗࡢᘧ࡛ 00L Ⅼ࡛ࡢᅇᢡᙉᗘ I00L ࢆồࡵࡓࠋ௡‫ܫ‬଴଴௅ ൌ ෍ȁ݂௞ ሼെʹߨ݅‫ݖ‬௞ ‫ܮ‬ሽȁଶ௞ୀଵ(2)

ࡇࡇ࡛ࠊ݂௞ ࡣ k ᒙ┠ࡢཎᏊᩓ஘ᅉᏊ࡛࠶ࡾࠊᵓᡂඖ⣲ࡢཎᏊᩓ஘ᅉᏊ࠿ࡽ⤌ᡂ࡟ᛂࡌ࡚ᖹᆒࡋࡓ್ࢆ⏝࠸ࡓࠋ‫ݖ‬௞ ࡣ k ᒙ┠ࡢᡂ㛗᪉ྥࡢ఩⨨࡛࠶ࡾࠊ⏺㠃ࢆ 0 ࡜ࡋ࡚ྛᒙࡢ㠃㛫㝸 dn ࡼࡾ௨ୗࡢᘧࢆ⏝࠸࡚⟬ฟࡋࡓࠋ௞‫ݖ‬௞ ൌ ෍ ݀௝(3)௝ୀଵᅗ 1 ࡟♧ࡋࡓ 122 ML ࡟࠾ࡅࡿ XRD ࣃࢱ࣮ࣥ࡜ィ⟬⤖ᯝ࡜ࡢẚ㍑ࢆᅗ 2 ࡟♧ࡍࠋࡇࡇ࡛ࠊ౪⤥᫬ࡢ In ⤌ᡂẚ x0 = 0.122ࠊ೫ᯒಀᩘ R = 0.87 ࡜ࡋࡓࠋィ⟬⤖ᯝࡣࠊᐇ㦂࡛ᚓࡽࢀࡓ࣓࢖ࣥࣆ࣮ࢡ࠾䠉㻞㻜㻥䠉SPring-8/SACLA ฼⏝◊✲ᡂᯝ㞟

SectionSection Bࡼࡧᕥྑࡢࣇࣜࣥࢪࣆ࣮ࢡࡢ఩⨨ࠊᙉᗘࠊ࠾ࡼࡧᖜࢆࡼࡃ෌⌧ࡋ࡚࠸ࡿࠋࡘࡲࡾࠊࣜ࢔ࣝࢱ࢖࣒ X⥺ᅇᢡ ᐃ࡟ࡼࡾࠊ⾲㠃ࡢ In ⤌ᡂࡸᖹᆒࡢ⭷୰ࡢ In ⤌ᡂࡔࡅ࡛࡞ࡃࠊ⭷୰ࡢᡂ㛗᪉ྥ࡟ᑐࡍࡿ Inศᕸࡢኚ໬ࡀࣜ࢔ࣝࢱ࢖࣒࡛ ᐃ࡛ࡁࡿࡇ࡜ࡀ♧၀ࡉࢀࡓࠋ

ᅗ 2. InGaAs/GaAs(001)ࡢᡂ㛗୰࡟ᚓࡽࢀࡓ XRD ࣃࢱ࣮ࣥࡢᐇ㦂್࠾ࡼࡧィ⟬್ࡢẚ㍑ࠋィ⟬ࡢヲ⣽ࡣᮏᩥཧ↷ ḟ࡟ᡂ㛗୰ࡢࣜ࢔ࣝࢱ࢖࣒ ᐃ࡛ᚓࡽࢀࡓ InGaAs ࡢ 00L ᪉ྥࡢ࣓࢖ࣥࣆ࣮ࢡ఩⨨ࡢ⭷ཌ࡟ᑐࡍࡿኚ໬ࢆࠊᡂ㛗㏿ᗘࡀ␗࡞ࡿ᮲௳ẖ࡟ࡲ࡜ࡵࡓ⤖ᯝࢆᅗ 3–5 ࡟♧ࡍࠋᘧ(1)ࠊ(2)ࢆ⏝࠸࡚࣓࢖ࣥ
ࣆ࣮ࢡࡢ఩⨨ࢆぢ✚ࡶࡗࡓ⤖ᯝࢆྛᅗ࡟ᐇ⥺࡛♧ࡋ࡚࠶ࡿࠋᡂ㛗㏿ᗘࡢẚ㍑ⓗ᪩࠸ 0.27 ࡜ 0.20
ML/s ࡢᡂ㛗᮲௳࡛ࡣࠊᐇ㦂⤖ᯝ࡜ィ⟬⤖ᯝࡣ୍⮴ࡋࠊ୍ࡘࡢ೫ᯒಀᩘ࡛⾲⌧ࡍࡿࡇ࡜ࡀྍ⬟࡛࠶ࡗࡓ(ᅗ 3,4)ࠋࡇࡇ࡛౑⏝ࡋࡓ೫ᯒಀᩘ R ࡣࡑࢀࡒࢀ 0.82 ࡜ 0.84 ࡛࠶ࡾࠊᡂ㛗㏿ᗘࡀ㐜࠸࡯࠺ࡀࠊ
R ࡀ኱ࡁ࠸ഴྥ࡛࠶ࡗࡓࠋࡇࢀࡽࡢ್ࡣࠊඛ⾜◊✲࡜ྠ⛬ᗘࡢ್࡛࠶ࡿ[2,3]ࠋ

ƔExp.
– Cal. (R=0.84)
x0 = 0.131

ƔExp.
– Cal. (R=0.82)
x0 = 0.112

ᅗ 3. ᡂ㛗㏿ᗘ 0.27 ML/s ࡛ᡂ㛗ࡋࡓ
InGaAs/GaAs(001)ࡢ InGaAs004 ࡢᅇᢡࣆ࣮ࢡ఩⨨ࡢኚ໬࡜ࠊ೫ᯒಀᩘࢆ⏝࠸࡚ィ⟬࡟ࡼࡾぢ✚ࡶࡗࡓࣆ࣮ࢡ఩⨨ࡢኚ໬ࠋᅗ 4. ᡂ㛗㏿ᗘ 0.20 ML/s ࡛ᡂ㛗ࡋࡓ
InGaAs/GaAs(001)ࡢ InGaAs004 ࡢᅇᢡࣆ࣮ࢡ఩⨨ࡢኚ໬࡜ࠊ೫ᯒಀᩘࢆ⏝࠸࡚ィ⟬࡟ࡼࡾぢ✚ࡶࡗࡓࣆ࣮ࢡ఩⨨ࡢኚ໬ࠋ୍᪉ࠊᡂ㛗㏿ᗘࡢ㐜࠸ 0.10 ML/s ࡛ࡣࠊ୍ࡘࡢ೫ᯒಀᩘ࡛ࡢ෌⌧ࡣ୙ྍ⬟࡛࠶ࡗࡓࠋ⭷ཌࡀⷧ࠸㡿ᇦ(⭷ཌ 37 ML)࡛ࡣ኱ࡁ࡞೫ᯒಀᩘ(R=0.92)ࢆ౑⏝ࡋ࡞࠸࡜ᐇ㦂⤖ᯝ࡜୍⮴ࡋ࡞࠸ࡀࠊࡑࡢࡲࡲࡢ್࡛ࡣ⭷ཌቑຍ࡟క࠺ኚ໬࡜୍⮴ࡏࡎࠊ70 ML ௨ୖࡢ⭷ཌ࡛ࡣࠊࡼࡾᑠࡉ࠸೫ᯒಀᩘ(R=0.87)࡛
ࡢィ⟬⤖ᯝ࡜୍⮴ࡋࡓࠋࡇࡢ⤖ᯝࡣࠊ≉࡟ᡂ㛗㏿ᗘࡀ㐜࠸ሙྜ࡟࠾࠸࡚ࠊࡇࢀࡲ࡛ࡢ೫ᯒࣔࢹࣝࢆ
ಟṇࡍࡿᚲせࢆ♧၀ࡋ࡚࠸ࡿࠋᡂ㛗㏿ᗘࡀప࠸࡯࡝⇕ᖹ⾮≧ែ࡟㏆࠸Ⅼࡸᡂ㛗࡟క࠸ṍࡳࡀኚ໬䠉㻞㻝㻜䠉SPring-8/SACLA ฼⏝◊✲ᡂᯝ㞟

SectionSection B

ࡍࡿⅬࢆ⪃៖ࡍࡿᚲせࡀ࠶ࡿ࡜⪃࠼ࡽࢀࡿࠋ
ƔExp.
– Cal. (R=0.87)– Cal. (R=0.92)
x0 = 0.112

ᅗ 5. ᡂ㛗㏿ᗘ 0.10 ML/s ࡛ᡂ㛗ࡋࡓ InGaAs/GaAs(001)ࡢ InGaAs004 ࡢᅇᢡࣆ࣮ࢡ఩⨨ࡢኚ໬࡜ࠊ೫ᯒಀᩘࢆ⏝࠸࡚ィ⟬࡟ࡼࡾぢ✚ࡶࡗࡓࣆ࣮ࢡ఩⨨ࡢኚ໬ࠋࡲ࡜ࡵ࠾ࡼࡧ௒ᚋࡢㄢ㢟㸸
MBE ἲࢆ⏝࠸ࡓ GaAs(001)ᇶᯈୖ࡬ࡢ InGaAs ⷧ⭷ᡂ㛗୰ࡢ In ೫ᯒ㐣⛬ࡢゎ᫂ࢆ┠ᣦࡋࠊSPring8 BL11XU ࡢ MBE ࡜ X ⥺ᅇᢡィࡀ┤᥋⤌ࡳྜࢃࡉࢀࡓ⿦⨨ࢆ฼⏝ࡋ࡚ࠊᡂ㛗୰ࡢࣜ࢔ࣝࢱ࢖࣒ᐃࢆ⾜࡞ࡗࡓࠋᅇᢡᙉᗘィ⟬࡜ᐇ㦂⤖ᯝ࡜ࡢẚ㍑࠿ࡽࠊᡂ㛗୰ࡢ⭷୰ࡢ In ศᕸࡢኚ໬ࢆ⟬ฟࡋࠊᡂ㛗୰ࡢ೫ᯒಀᩘࢆぢ✚ࡶࡗࡓࠋᡂ㛗㏿ᗘࡀ᪩࠸ሙྜࡣ(0.20, 0.27 ML/s)ࠊ୍ࡘࡢ೫ᯒಀᩘ࡛ィ⟬⤖ᯝ࡜ᐇ㦂⤖ᯝࡀ୍⮴ࡋࡓࡀࠊᡂ㛗㏿ᗘࡀ㐜࠸ሙྜ(0.10 ML/s)࡛ࡣ୍ࡘࡢ೫ᯒಀᩘ࡛ㄝ᫂ࡍࡿࡇ
࡜ࡀ୙ྍ⬟࡛࠶ࡗࡓࠋ௨ୖࡢ⤖ᯝࡣࠊ≉࡟ᡂ㛗㏿ᗘࡀ㐜࠸ሙྜ࡟࠾࠸࡚ࠊࡇࢀࡲ࡛ࡢ೫ᯒࣔࢹࣝࢆ
ಟṇࡍࡿᚲせࢆ♧၀ࡋ࡚࠸ࡿࠋཧ⪃ᩥ⊩㸸
[1] A. Rosenauer et al.: Phys. Rev. B 64, 245334 (2001).
[2] H. Toyoshima et al.: Appl. Phys. Lett. 63, 821 (1993).
[3] K. Muraki, et al.: Appl Phys. Lett. 61, 557 (1992).
[4] M. Takahasi et al.: Jpn. J. Appl. Phys. 41, 6247 (2002).
[5] T. Sasaki, et al.: Appl. Phys. Express 2, 085501 (2009).
[6] H. Suzuki, et al.: Appl. Phys. Lett. 97, 041906 (2010).

(Received: March 31, 2019; Accepted: July 16, 2019; Published: August 29, 2019)䠉㻞㻝㻝䠉