Guardian™ Configuration Guide
Guardian uses EIES (Electron Impact Emission Spectroscopy)

be monitored at once with a single sensor (8 materials for twotechnology to detect and monitor the deposition of thin films. Itsensors) using the optional beam splitter and the appropriate

is especially useful for CIGS applications. A complete Guardian

number of detectors. Guardian can also be paired with a Q-pod

system includes a Guardian controller, an EIES Sensor withor SQM242 QCM system for automatic calibration through thethe appropriate filament cable, and an Optical Detector with theGuardian software.

appropriate detector cable and filter. Up to four materials can

The following guide will help you select the options and accessories needed to build a complete Guardian system.

NOTE: Diagram is for reference only. Sources and sensors must be aligned per the installation instructions.

Guardian Configuration Guide

Guardian Part Numbers and Descriptions							Guardian Controller (choose one)782-900-031
Guardian Controller for One Sensor (Standard or Gas Compensating)		Guardian EIES Controller with one sensor input. This will work with either a standard or gas
compensating sensor.
782-900-050
Guardian Controller for Two Sensors (Standard or Gas Compensating)		Guardian EIES Controller with two sensor inputs. This will work with either a standard or gas
compensating sensor in each of two inputs.

EIES Sensor (choose one)
016-600-G22
Guardian Standard Single Sensor & Feedthrough Assembly, 22” (539 mm), CF40 flange		Standard EIES single sensor. Includes CF40 (2-3/4" ConFlat) feedthrough assembly and in-vacuum
hardware, standard 20” (508 mm) light pipe and in-vacuum EIES cable, 22” (539 mm). Other lengths
available on request, min. 6.25” (159 mm), max. 32” (813 mm).
016-601-G22
Guardian Gas Compensating Sensor & Feedthrough Assembly, 22” (539 mm), CF40 flange		Gas compensating EIES sensor. Uses an additional filament to subtract the signal emitted by residual
gas to achieve an accurate baseline. Detects materials that have difficulty when using a standard single
sensor due to residual gas. Other lengths available on request, min. 9” (229 mm), max. 34.6” (879 mm).

Beam Splitter (optional)
782-900-034
Guardian Fiber Optic Beam Splitter (1:3) - 400 mm length		Splits the light beam from the sensor into 3 separate beams. Allows the detection of 3 materials from thesame sensor. An optical detector and optical filter must be attached to each of the 3 ends.
782-900-034-x-yyy Guardian Fiber Optic Beam Splitter (1:x) - yyy mm length		A custom version of the standard beam splitter. The x value determines how many ways the beam is split(2 or 4 are the choices) and yyy determines the length of the splitter (400 mm is typical).

Filament Cable (choose one per sensor) New design attaches securely to feedthrough.		
Cable that connects a standard single sensor feedthrough to the Guardian Controller.
600-1406-P10
Guardian Single Filament Cable, 10’ (3m)		
600-1406-P40
Guardian Single Filament Cable, 40’ (12m)					Cable that connects a gas compensating sensor feedthrough to the Guardian Controller.
600-1407-P10
Guardian Dual Filament Cable, 10’ (3m)
600-1407-P40
Guardian Dual Filament Cable, 40’ (12m)		

Optical Detector (select appropriate quantity)
782-900-030				

Guardian Optical Detector Module
Works in conjunction with an optical filter to isolate and detect the light from thesensor for a given material being deposited. Optical filters sold separately.

Optical Detector Cable (select appropriate quantity and length)		
782-505-065
782-505-065-40

Cable that connects the optical detector to the Guardian.
Guardian Detector Cable, 10’ (3m)
Guardian Detector Cable, 40’ (12m)Guardian Configuration Guide

Guardian Part Numbers and Descriptions			
Guardian EIES Optical Filters (select appropriate quantity and wavelength)		
Filters the beam of light received by the optical detector to single out a specified wavelength.		This allows the Guardian to monitor the specific material being deposited. Other filters available
on request.
782-900-035-202
Guardian Optical Filter - Center Wavelength - 202nm, BP10nm, (Zn)782-900-035-241
Guardian Optical Filter - Center Wavelength - 241nm, BP10nm, (Co, Au)
782-900-035-252
Guardian Optical Filter - Center Wavelength - 252nm, BP10nm, (Si)782-900-035-265
Guardian Optical Filter - Center Wavelength - 265nm, BP10nm, (Ge, Pt, Ta, Ir)
782-900-035-267
Guardian Optical Filter - Center Wavelength - 267nm, BP3nm, (Au)782-900-035-294
Guardian Optical Filter - Center Wavelength - 294nm, BP2nm, (Hf)		
(Ga [when using a gas compensating sensor])
782-900-035-304
Guardian Optical Filter - Center Wavelength - 304nm, BP2nm		
(Ba, In [when using a gas compensating sensor])
782-900-035-325
Guardian Optical Filter - Center Wavelength - 325nm, BP10nm, (Cu, Cd)
782-900-035-358
Guardian Optical Filter - Center Wavelength - 358nm, BP10nm, (Nb, U, Cr)
782-900-035-364
Guardian Optical Filter - Center Wavelength - 364nm, BP10nm, (Ti, Pb)
782-900-035-396
Guardian Optical Filter - Center Wavelength - 396nm, BP10nm, (Al)782-900-035-417
Guardian Optical Filter - Center Wavelength - 417nm, BP2nm, (Ga)782-900-035-451
Guardian Optical Filter - Center Wavelength - 451nm, BP5nm, (In)782-900-070
Monochromator		
Adjustable optical filter that allows the user to specify which wavelength to single out.		
Adjustable from 200 - 800nm.		

Replacement Parts for New Sensors and Feedthrough Assembly 016-600-Gxx and -601-Gxx
016-400-G1
Flux Sensor, High Rate for 016-600-Gxx Sensor and Feedthrough Assembly
016-400-G2
Flux Sensor, Standard Rate for 016-600-Gxx Sensor and Feedthrough Assembly
016-400-G5
Gas Sensor, for 016-601-Gxx Sensor and Feedthrough Assembly
016-400-G6
Flux Sensor, for 016-601-Gxx Sensor and Feedthrough Assembly
016-201-G1
Emitter Assembly for all 016-400-Gx Sensors used in 016-600-Gxx and -601-Gxx				
782-900-038
Guardian Photomultiplier Tube Replacement		Replaces the Photomultiplier tube in the optical detector.											016-509-G22
Guardian Sensor EIES In-vacuum Cable, 22” (559 mm), other lengths available		A gas compensating sensor uses two cables. For retrofit to new sensors.											Replacement Part for Discontinued Sensors
782-530-015		

Guardian Sensor Filament Replacement (for discontinued 782-900-029 and -052 sensors)
Replacement filaments for EIES sensors. A gas compensating sensor uses two filaments.			

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