PSG50x/-S, PSG51x-S,
Pirani Standard Gauge
The INFICON Pirani Standard Gauges, PSG500,
PSG500-S PSG502-S, PSG510-S and PSG512-S,
employ the most advanced digital Pirani technology
available in the marketplace. The rugged stainless steel
sensor cell and compact design qualify them for use on
semiconductor systems and for standard applications,such as for vacuum lines.

ADVANTAGES• Easy push button ATM and HV adjustment• Compact space saving and rugged design• Aluminum housing• Measuring performance independent of mounting orientation for maximum engineering freedom in tool design• All stainless steel measuring cell
• Logarithmic signal output for easy integration• 10 bar absolute overpressure with threaded connections• 250°C bakeable version• Nickel filament option for corrosive applications• Ceramic feedthrough for extremely corrosive applications (PSG510 and PSG512)• Optional setpoints• RoHS compliance
APPLICATIONS• Controlling high vacuum ionization gauges• For vacuum pressure monitoring• Safety circuits in vacuum systems• General vacuum measurement and control in the fine and rough vacuum range

1

PSG50x/-S, PSG51x-S,

PSG50x/-S, PSG51x-S,
ORDERING INFORMATION
TypePSG500

PSG500-S

PSG502-S

PSG510-S

PSG512-S

Setpoints
Filament
FeethroughNone
TungstenGlass

Two setpoints
TungstenGlass

Two setpoints
NickelGlass

Two setpoints
Tungsten
Ceramic

Two setpoints
NickelCeramic

DN 16 ISO-KF
DN 16 CF-R
1/8 in. NPT
8 VCR
4 VCR
1/2 in. tube
7/16-20 UNF
DN 16 ISO-KF long tube
DN 16 CF-R long tube

350-060
350-062
350-061
350-064
350-065
350-063350-066
350-067
350-068

350-080
350-082
350-081350-084
350-085
350-083
350-086
350-087
350-088350-140
350-142350-141
350-144
350-145
350-143
350-146
350-147
350-148350-200-350-300-

Replacement sensor

PSG500/-S

PSG502-S

PSG510-S

PSG512-S

Filament
FeedthroughTungsten
Glass

NickelGlass

Tungsten
Glass

NickelCeramic

DN 16 ISO-KF
DN 16 CF-R
1/8 in. NPT
8 VCR
4 VCR
1/2 in. tube
7/16-20 UNF
DN 16 ISO-KF long tube
DN 16 CF-R long tube

350-920350-922350-921350-924350-926
350-923350-925350-927350-928350-900
350-902350-901
350-904
350-906
350-903350-905
350-907350-908

350-930-350-940-2

PSG50x/-S, PSG51x-S,

PSG50x/-S, PSG51x-S,
SPECIFICATIONSType

PSG500

PSG500-S

PSG502-S

PSG510-S

PSG512-S

Filament
FeedthroughTungstenGlass

Tungsten
Glass

NickelGlass

Tungsten
Ceramic

NickelCeramic

Measuring principle
Measurement range (air, O2 , CO, N2)

thermal conductance according to Pirani
5 × 10-4 to 1000 mbar

Accuracy (N2)
1 × 10-3 … 100 mbar

±15% of reading

5 × 10-4 … 1 × 10-3 mbar

±50% of reading

100 … 1000 mbar

±50% of reading

Repeatability (air) 1 × 10-3 … 100 mbar
Output signal (measurement signal)

2% of reading

Voltage range

0 … +10.3 V

Measurement range

V +1.9 … +10.0 V

Voltage vs. pressure

Logarithmic 1.286 V / decade

Error signal
Output impedance

0 … +0.5 V (filament rupture)
2 × 4.7 Ω

Minimum loaded impedance
Response time
Gauge identification
Adjustment
Setpoint

10 kΩ, short-circuit proof
80 ms
27.0 kΩ, referenced to supply common
One tactile switch for ATM and HV adjustment
none2Setting range

2 × 10-3 … 500 mbar

Hysteresis

10% of reading above lower threshold

Relay contact

30 V (dc) / 0.5 A (dc) floating

Switching time
Supply voltage<20 msAt gauge+14 … +30 V (dc)

Ripple≤1 VppCurrent consumption<500 mA (max. starting current)

Power consumption
Electrical connection≤1 W
FCC 68 / RJ45 appliance connector, 8 poles, maleSensor cable
Cable length
Materials exposed to vacuum

Material FilamentInternal volume≤100 m (8 × 0.14 mm2)
Glass, Ni, NiFe
Al2O3, Ni,DIN
1.4301/1.4305/1.4435
WW

DIN 1.3981/1.4305/1.4435
Ni

DN 16 ISO-KF, DN 16 CF-R, 7/16-20 UNF

1.5 cm3 (0.092 in.3)

DN 16 ISO-KF and DN 16 CF-R long tube

10 cm3 (0.61 in.3)

1/8 in. NPT, 4 VCR, 8 VCR, 1/2 in. tube

2 cm3 (0.122 in.3)

Admissible pressure (absolute)1)

In horizontal mounting orientation

2)

Long tube

3

8 poles plus shielding

PSG50x/-S, PSG51x-S,W

10 bar, limited to inert gases

NiPSG50x/-S, PSG51x-S,
Type

PSG500

PSG500-S

PSG502-S

PSG510-S

PSG512-S

Filament
FeedthroughTungsten
Glass

Tungsten
Glass

NickelGlass

Tungsten
Ceramic

NickelCeramic

Admissible temperature
Operation+5 … +60°C

Vacuum connection 1)

80 / 250°C 2)

StorageMounting orientation–20 … +65°C
anyDegree of protection
WeightIP40

DN 16 ISO-KF, 7/16-20 UNF

80 g

DN 16 CF-R, 4 VCR

100 g

1/8 in. NPT, 1/2 in. tube

70 g

8 VCR, DN 16 ISO-KF long tube

130 g

DN 16 CF-R long tube

140 g

1)

In horizontal mounting orientation

2)

Long tube

4

PSG50x/-S, PSG51x-S,

PSG50x/-S, PSG51x-S,
DIMENSIONS65 (2.56)

20.9 (0.82)

70.3 (2.77)

50 (1.97)mm (in.)www.inficon.com

reachus@inficon.com

Due to our continuing program of product improvements, specifications are subject to change without notice.
The trademarks mentioned in this document are held by the companies that produce them.
tiba29e1-d©2024

1/2" tube

24 (0.95)

19 (0.75)

29 (1.14)
115 (4.53)

DN 16 CF-R

DN 16 ISO-KF* ) PSG51x-S: 20 (0.78)

1/8" N PT
116 (4.57)

4 VCR

8 VCR

41.5 (1.63)

31.5 (1.24)

14 (5.5)

DN 16 CF-RDN 16 ISO-KF

15 (0.59) *)32.8 (1.29)

7/16-20 UNF