Attn.:

Title:

Cautions and Request on Handling ofParts Deposited with Thin Metal Films inNo.

VeQRR2_2421-00002

DateOctober 14, 2016CANON ANELVA CORPORATION
Quality Management Div.

Thin Film Deposition Systems
Thank you for using CANON ANELVA products.

This is to notify customers using thin film deposition systems of necessity for special care when handling parts
deposited with thin metal films.
Some metal films deposited on the internal jigs and shields in thin film

deposition systems such as sputteringsystems or evaporation systems can ignite upon surface shock, mechanical friction, etc. Especially exposed chamber
surface to the atmosphere or the surface peeling thin films is in the active state, which may ignite upon the shock orfriction. It is possible to occur on any metal film; especially, it is said to be very easy to occur on films of ahigh-melting-point metal (Ti, W, Mo, Ta, etc.), their silicide, Mg, La, Zr, Hf, Y, or mixture of platinum and anothermetal.
Ease or scale of ignition differs depending on film materials, deposition conditions, film surface conditions,temperature, etc.
There is a risk of personnel injury (e.g. burns) or fire in case of ignition; please follow cautions and request describedin the attached sheet for handling of parts deposited with these thin metal films.
We will continually improve the product quality and reliability to ensure customer satisfaction.

Parts deposited with thin metal films as a result of deposition ofApplicablesystem

high-melting-point metals, their silicides, Mg, La, Zr, Hf, Y, orand other metals in thin film

mixture of Ptdeposition systems such as sputtering systems or―evaporation systems

ActionPlease follow cautions and request on handling of parts deposited with thin metal

itemsfilms.

Refer toseparate sheet

Price,
lead time,

N/A―

Schedule

Immediately―

Remarks

N/A―

work time

Feel free to contact our sales or service representatives.
http://www.canon-anelva.co.jp/english/contacts/index.html
CANON ANELVA CORPORATIONPROPRIETARY & CONFIDENTIALVeQRR2_2421-00002 Attached sheet
Precautions on handling parts deposited with metal films
Some metal films deposited on the internal jigs and shields in thin film fabrication systems,etc., may ignite upon surface shock or mechanical friction. Especially exposed chamber
surface to the atmosphere or the surface peeling thin films is in the active state, which mayignite upon the shock, friction, etc.
It is possible to occur on any metal film; especially, it is said to be very easy to occur onfilms of a high-melting-point metal (Ti, W, Mo, Ta, etc.), their silicide, Mg, La, Zr, Hf, Y,or mixture of catalytically active Pt and other metals.
Ease or scale of ignition differs depending on film materials, deposition conditions, film
surface conditions, temperature, etc.
There is a risk of personnel injury (e.g. burns) or fire in case of ignition; be sure to follow
the instructions below when replacing the shields deposited with metal films.
Wear the protective gears (fire-safe mask and gloves) during work.
Possibility of ignition in the vacuum cleaner if using it to take up the flaked thin films.
Do NOT use the vacuum cleaner.
Pay attention to falling or scattering the flaked thin film and do NOT place theflammable items (clean paper or alcohol) in the vicinity. Possibility of ignition orcombustion.
Put the flaked thin film into a noncombustible container and separate it from otherflammable items.
When transferring the internal jigs or shields deposited with metals, take extra care toensure that nothing can administer shock or friction to these parts. There is a risk of
causing the ignition upon shock or mechanical friction during transfer.
Peeling thin films must be done in a place with appropriate facilities. Also, it must bedone only by trained personnel.

WARNING
Possibility of ignition or combustion.
Take extreme care when handling parts deposited with thin metal films.