ᵡᶍᶐᶎᶍᶐᵿᶒᶃᴾᵮᶐᶍᶄᶇᶊᶃMessage from the President
CANON ANELVA contributes to the development of society
through supplying high value-added products based on its ultra-high vacuum technology.

Since its establishment in 1967, CANON ANELVA
has focused its business on vacuum equipment for
semiconductors and electronic components, basedon the theme of “pioneering the future with vacuumtechnology.”
Our equipment can achieve a vacuum comparable
to that of outer space. We manufacture devices
WKDWSURGXFHH[WUHPHO\WKLQÀOPVDWWKHQDQROHYHO
(one-millionth of a millimeter) as well as vacuum
components for those devices.
In 2005, our company became a member of theCanon Group. Today, as part of the Canon Industrial
Group, we provide cutting-edge technologies
throughout the world with the mission of “using
innovative industrial equipment to create new value
with our customers.”
Information and telecommunications technology,
and the Internet and smartphones in particular, havebecome an indispensable part of our lives.
The semiconductors and electronic componentsthat form the basis of these products are constantly
undergoing technological innovation to improvetheir performance. Our vacuum technology-based
products and solutions have been and will continue
to support some of these innovations.
We are very pleased to be able to provide value toour customers and society with our products.
We will respond to needs, value cooperation withour customers, and boldly take on new challenges.
We sincerely appreciate the support and cooperationof everyone associated with our company.
We look forward to your continued patronage.

Takumi Nakajima
President & Representative DirectorEnabling nano level micro fabrication
by ultra-high vacuumVacuum is a state of space having sub-atmospheric pressure.
Ultra-high vacuum that enables nano level micro fabrication isnaturally available only in outer space at the altitude of 400 km or above.
This ultra-high vacuum is where CANON ANELVA’s expertise lies.

Why vacuum ‫ء‬,WLVGL඼FXOWWRSOD\FDWFKLQDFURZGHGVSDFH,GHDOO\WKHUHVKRXOGEH
no obstacles between the pitcher and the catcher.
7KHVDPHLVWUXHIRUÀOPGHSRVLWLRQ+LJKTXDOLW\WKLQÀOPVZLWKUHGXFHGLPSXULWLHVFDQEH
created by creating a vacuum that reduces the number of obstructing gas molecules
resulting in an environment where molecules and atoms can be aimed accurately.
There are more than 2.5×1019 molecules such as Nitrogen and Oxygen in a cubic centimeter of atmosphere.
The pressure inside of the CANON ANELVA’s magnetic head manufacturing equipment is10-7 Pa (Pascal) which is an extremely low molecular densitythat is 1 trillionth the atmospheric pressure of 105 Pa.

ᵟᶒᶋᶍᶑᶎᶆᶃᶐᶃᵴᵿᶁᶓᶓᶋ

Products manufactured
XWLOL]LQJYDFXXPWKLQÀOPformation technologies
A great number of products throughout
the world are manufactured utilizing vacuum technology.
Vacuum technology is an indispensable
key technology of the modern world.

4PMBSQBOFM
Formation of power generating layers andHOHFWURGHVRIVRODUSDQHO WKLQÀOPW\SH-$%57
Formation of transparent electrodes to drive
the liquid crystals of an LCD panel)BSEEJTLSFDPSEFS
Formation of magnetoresistive elementsof magnetic head to read/write hard disk data
as well as forming magnetic layerof magnetic disk to record data9DFXXPWKLQÀOPformation technology
utilizing sputtering phenomenon:KHQYROWDJHLVDSSOLHGWRDVXEVWUDWHDQGÀOPPDWHULDO WDUJHW
in a vacuum containing inert gas (e.g. argon), the inert gas ionizes andcollides with the target at high-speed.
This collision knocks out (sputtering) the atoms and molecules
IRUPLQJWKHWDUJHWFDXVLQJWKHPWRDGKHUHWRWKHVXEVWUDWHDQGIRUPDWKLQÀOP7KHWKLQÀOPKDVYDULRXVFKDUDFWHULVWLFVGHSHQGLQJRQWKHPDWHULDO
it is made of and its thickness. There characteristics are utilized in various devices.

MNNBUFSJBMUBSHFUJPO
TQVUUFSFEBUPNNPMFDVMF
TVCTUSBUFJOFSUHBTWBDVVNQVNQWBDVVNDIBNCFSEVSJOHTQVUUFSJOH-&%MJHIUJOHFormation of light emitting
diode’s electrodes

1$
Formation of electrodes ofvarious semiconductor devices

-FBEJOHUIF'VUVSFXJUI5FDIOPMPHZԏԤԡԞԟԏԍԒԔԝԋԗԞԡԏԋԕԋԟԋԝԣԋԔԦԋԝԚԋԙԋԨԢԔԋԢԔԝԑԋԟԞԙԏ

$BOPO*OEVTUSJBM(SPVQ%JSFDUPSZ +BQBO

Canon ANELVA Corporation
Kawasaki-city, Kanagawa

Canon Inc. (Optical Products Operations)
Utsunomiya-city, Tochigi

Canon Tokki Corporation
Mitsuke-city, Niigata

About Canon Industrial Group
Canon has four industry-oriented business groups: Printing, Imaging, Medical, and Industrial.
The Industrial Group is a group of ultra-precision technology professionals responsible for Canon's industrial equipment
business.
As a member of the Industrial Group, Canon ANELVA will work with a total of 15 companies and divisions,
including domestic affiliates of Canon Inc. (Optical Products Operations), Canon Tokki, Canon Machinery, and Canon
Semiconductor Equipment, to co-create new value with customers through innovative industrialequipment.

Evolving manufacturing to enhance the future of humanity and the planet
Canon Industrial Group provides high-precision technology in the form of industrial equipment solutions.
Customers all over the world use our industrial equipment to manufacture products and solutions that offer greater
functionality, improved performance and brand-new values. We help enable manufacturing evolution and therealization of an exciting future society in a sustainable manner for humanity and the planet.

ԤԢԋCanon Machinery Inc.
Kusatsu-city, Shiga

Canon Semiconductor Equipment Inc.
Ami-machi, Inashiki-gun, Ibaraki6ROXWLRQV2෇HUHG

Total vacuum solutions
by CANON ANELVA, a comprehensive
Manufacturer of Vacuum Systems
Semiconductor Device Manufacturing Equipment
Magnetic Device Manufacturing Equipment
Equipment for Electronic Device Manufacturing and for R&D
Components
Maintenance ServiceHigh throughput and easy-to-use semiconductor device manufacturing equipment

Semiconductor Device Manufacturing Equipment
Meeting the needs of nano-scale semiconductor devices.
Semiconductors are used in extremely broad range of products today and have become
indispensable to an information-oriented society.
CANON ANELVA develops and manufactures highly reliable sputteringequipment for use in semiconductor production lines.
7KLQÀOPIRUPDWLRQE\VSXWWHULQJSOD\VDYHU\LPSRUWDQWUROHLQQDQRPHWHUOHYHOSURFHVVLQJ
required for a large scale integration of semiconductor devices.

Sputtering Equipment for Metal Gates
Sputtering equipment that meets every requirement
in all stages from material development
all the way to commercial production.
CANON ANELVA’s proprietary cathode design
has led to the realization of damage free sputtering.
([FHOOHQWÀOPWKLFNQHVVXQLIRUPLW\DQGSUHFLVHWKLFNQHVV
FRQWURODUHDFKLHYHGPRUHRYHUDOOR\ÀOPGHSRVLWLRQ
by co-sputtering via multiple cathodes is supported.

Sputtering Equipment for Nonvolatile Memory
Recently, a high-speed nonvolatile memory
is expected to take over the conventional semiconductor
memory as the next generation product.
&$121$1(/9$RරHUVDUDQJHRIVSXWWHULQJHTXLSPHQWWRVXSSRUW
development and mass production of the nonvolatile memory.
7KHVHHTXLSPHQWXWLOL]HWKHWKLQÀOPIRUPDWLRQ
technology cultivated by CANON ANELVA for many years
ZKHUHDPXOWLOD\HUWKLQÀOPGHSRVLWLRQRIKLJK
uniformity required by nonvolatile memory is enabled.

0DJQHWLFGHYLFHPDQXIDFWXULQJHTXLSPHQWDGRSWLQJDVWDWHRIWKHDUWWKLQÀOPWHFKQRORJ\Magnetic Device Manufacturing Equipment
Supporting both present and future data storage
manufacturing needs with our unique technology.
7KLQÀOPIRUPDWLRQWHFKQRORJ\EDVHGRQXOWUDKLJKYDFXXPWHFKQRORJ\LV
DGULYLQJIRUFHIRULQQRYDWLRQVLQWKHGDWDVWRUDJHÀHOGIn fact, high density magnetic heads and disks for use in hard disk drives
for PCs and servers have been realized using sputtering equipment manufactured
with the proprietary technology of CANON ANELVA, which commands the world’s largest market share in the segment.
We intend to continue our technology leadership in the evolution of hard disk drives.

Sputtering Equipment for Magnetic Disks+DUGGLVNVSXWWHULQJHTXLSPHQWWKDWLV
capable of high throughput mass productionof high density recording media.
The equipment provides both high productivity
DQGKLJKTXDOLW\ÀOPVWKURXJKWKHXVHRI
high vacuum chambers, thus realizing low production
cost of high performance magnetic disks.
)OH[LEOHHTXLSPHQWFRQÀJXUDWLRQVDUHDYDLODEOHIRUSURFHVVHVthat range from R&D to the production of a varietyof next-generation high density recording media.

Sputtering Equipment for Magnetic Heads
Sputtering equipment for TMR heads that utilizes
WXQQHOPDJQHWRUHVLVWLYHHරHFW
Magnetron cathodes are designed toDFKLHYHERWKH[FHOOHQWÀOPWKLFNQHVVFRQWUROSHUIRUPDQFH
DVZHOODVWKLFNQHVVXQLIRUPLW\RIXOWUDWKLQÀOPVDeposition takes place at an orderof magnitude less pressure than thatof normal sputtering, thus realizing
WKHIRUPDWLRQRIYHU\ÁDWÀOPVRIORZUHVLVWDQFH

9DOXDEOHLQH[SHULPHQWV5 'DQGDOOWKHZD\WRDFRPPHUFLDOSURGXFWLRQ

Equipment for Electronic Device Manufacturing and for R&D
Comprehensive product lineups active in a variety of scenarios.
7KHWHFKQRORJ\WRIURPDQGSURFHVVWKLQÀOPZLWKLQ
a vacuum is used in a variety of device manufacturing processes.
CANON ANELVA’s versatile device lineup supports next generation technology research,
parts development, and production of products including LEDs and power devices.

Wafer Bonding Equipment
This wafer bonding equipment performs fully automated, integrated vacuum
SURFHVVLQJIURPVXEVWUDWHWUDQVIHUWRÀOPGHSRVLWLRQERQGLQJDQGUHFRYHU\%\RSWLPL]LQJWKHW\SHDQGWKLFNQHVVRIWKHWKLQÀOPXVHGIRUERQGLQJ
it is possible to perform bonding at the atomic level at room temperature
and without pressure, regardless of the wafer material.

Equipment for R&D/Small-Scale Production
CANON ANELVA’s equipment is used in a variety
of applications from development to productionof the next generation devices and materials,
like the compact and versatile sputtering equipment.

+LJKYDOXHDGGHGHQHUJ\VDYLQJSURGXFWOLQH

ComponentsProducts fully packed with vacuum technologies/know-hows accumulated
by CANON ANELVA, the comprehensive manufacturer of vacuum systems.
1XPHURXVFRPSDQLHVDQG5 'ODERUDWRULHVHQJDJHGLQWKLQÀOPPDQXIDFWXULQJ
DQGRWKHUUHODWHGÀHOGVXVH&$121$1(/9$·VYDFXXPFRPSRQHQWVDVLQGLVSHQVDEOH
parts in systems incorporating vacuum technology.
CANON ANELVA’s vacuum technology contributes tostable operations of equipment and measuring instruments.

Vacuum Gauges
CANON ANELVA meets a wide variety of needs with our diverse lineup including
DWUDQVGXFHUW\SHSURYLGLQJH඼FLHQWZLULQJDQGORZSRZHUFRQVXPSWLRQMicrofocus X-ray Source
CANON ANELVA’s X-ray sources for industrial non-destructive testing are equippedwith transmission-sealed X-ray tubes that enable high-resolution andhigh-speed imaging.

Quadrupole Mass Spectrometers‫ق‬Mass Filters‫ك‬A quadrupole mass spectrometer is a versatile instrumentused in analyzing residual gases, inorganic gases,
and thermal desorption gases, as well as monitoring process gases.
7KHSURGXFWLVGHVLJQHGZLWKFDUHIXOFRQVLGHUDWLRQRIRSHUDELOLW\DQGHQHUJ\H඼FLHQF\Leak Detectors
CANON ANELVA’s leak detectors are used in a variety ofquality control applications requiring high sealing performance.
These products that emphasize operability are highly regarded
by our customers in a variety of industries.

Vacuum Pumps
CANON ANELVA provides a variety of pumps from low vacuum to ultra-high vacuum
LQDGGLWLRQWRFU\RSXPSVZLWKWKHZRUOG·VKLJKHVWHQHUJ\H඼FLHQF\6XSSRUWLQJPD[LPXPHTXLSPHQWSHUIRUPDQFHDWWKHIURQWOLQH

Maintenance Service

2෇HULQJFORVHFRPPXQLFDWLRQZLWKRXUFXVWRPHUVCANON ANELVA maintains close communication with customers in providing
service to maintain high performance for equipment and products.
Maintenance services best suited for each customer including periodic maintenance,
UHSDLURYHUKDXOSDUWVFOHDQLQJDQGHTXLSPHQWPRGLÀFDWLRQDUHSURYLGHG

Customized preventive maintenance service&$121$1(/9$RරHUVFXVWRPL]HGSUHYHQWLYHPDLQWHQDQFHVHUYLFHV
to provide parts and components replacement as well as pump maintenanceat optimum cycles to enable a long and stable
operation of customer’s valuable equipment.
This enables a proactively prevention of equipment failures,continued high performance, increased availability
and systematic budget control.

Parts cleaning/recycle business
Parts such as shield inside the chamber must be
periodically replaced/cleaned/regenerated
in order to maintain stable equipment operation.
Because we are a comprehensive manufacturer ofvacuum systems, CANON ANELVA can provide stable
and high quality service in each step of the process
such as cleaning, correction, and spraying.

Providing higher quality service
To ensure higher quality service of service engineers
CANON ANELVA maintains backup organizations
that provide education and training programs, streamlined manuals,
parts supply, and support centers.
&$121$1(/9$·VHරRUWVWRSURYLGH
higher quality maintenance service are ceaseless.

Our organization supports
our technology

The San-ji (Three Selfs) Spirit
Canon group’s guiding principles

Selfmotivation(YHU\HPSOR\HHKDVDNH\UROH&$121 $1(/9$·V WRWDO FRUSRUDWH VWUHQJWK LV D UHVXOW RI
WHDPSOD\VEDVHGRQWKH6DQML 7KUHH6HOIV 6SLULWCANON ANELVA contributes to the creation ofDQDලXHQWVRFLHW\WKURXJKWKHXQLÀHGHරRUWVRIDOOLWVHPSOR\HHV
It also aims at improving the quality of its products
and services while promoting the environmental sustainability.

Take the initiativeand be proactive inall things.

Self
Self
management awarenessConduct oneself
with responsibility
and accountability.

R&D Division
CANON ANELVA has a total commitment to the cutting-edge R&D and design technology
innovations in order to deliver competitive products to customers in the highly competitive
semiconductor and electronic component industries where product evolution is extremely rapid.
CANON ANELVA has achieved a number of excellent results in the development of globally
advanced technologies not only by in-house R&D but also through active joint research withuniversities and external laboratories.

Sales Division
CANON ANELVA’s Sales Division quickly acts with expertise to precisely identify needs ofcustomers and assist them in selecting the most appropriate equipment model. It also strives toidentify the market needs and collaborate with the relevant divisions to continuously support thedevelopment of improved products.

Field Service Division
CANON ANELVA’s Field Service Division provides customers with tailored maintenance to ensurea full realization of the equipment potential. It also aims at improving customer satisfaction by
constantly updating and deepening expert knowledge of the processes, mechanisms, electriccontrols and software involved in the equipment.

Honored with the top class Prime Minister’s Award atthe Sixth Industry-Academia-Government Collaboration Award Ceremonyᵢᶃᶔᶃᶊᶍᶎᶋᶃᶌᶒᴾᶒᶆᶃᶋᶃ'HYHORSPHQWRIKLJKSHUIRUPDQFHWXQQHOPDJQHWRUHVLVWLYHHOHPHQWIRUXOWUDKLJKGHQVLW\+''V*Awarded jointly with the National Institute of Advanced Industrial Science and Technology and Osaka University

Honored with a Contribution Award in the 40th Ichimura Industrial Awardᵢᶃᶔᶃᶊᶍᶎᶋᶃᶌᶒᴾᶒᶆᶃᶋᶃ'HYHORSPHQWDQGLPSOHPHQWDWLRQRIVSXWWHULQJHTXLSPHQWIRU
WKHPDQXIDFWXULQJRIGLVNDQGKHDGIRUXOWUDKLJKGHQVLW\+''*Awarded jointly with Tohoku University

Honored with the 34th Inoue Harushige Awardᵢᶃᶔᶃᶊᶍᶎᶋᶃᶌᶒᴾᶒᶆᶃᶋᶃ

0DJQHVLXPR[LGHWXQQHOPDJQHWRUHVLVWLYHHOHPHQWDQGLWVPDVVSURGXFWLRQWHFKQRORJ\*Awarded jointly with the National Institute of Advanced Industrial Science and Technology

Understand one’s
situation and role in allsituations.

Production Division
Every product supplied by CANON ANELVA plays a crucial role in determining the quality ofWKHÀQDOSURGXFWRIRXUFXVWRPHUV&$121$1(/9$LVFRPPLWWHGWRVWULQJHQWTXDOLW\FRQWURO
to guarantee the best quality products. It is also active in enhancing the competitiveness of ourmanufacturing technology by production technique innovations.

Procurement Division
The Procurement Division has the responsibility to improve QCD from the early stage of productdevelopment ensuring availability of high quality components at the right cost and time. It is also
focused on “Green Procurement“ to reduce the environmental burden. Another focus of thedivision is oversea procurements.

Administrative Division
The Administrative Division duties include corporate management, finance and accounting,personnel training, development/improvement of the IT infrastructure, and protection of
intellectual property, thus supporting the overall operations of the company. In order to meet
drastic changes in the corporate environment, it has to continuously perform business innovations
and propose management strategies. It is also active in developing human resources utilizing thewide variety of the company’s internal training programs.

Commitment to the Environment
ӳ Assurance of Environment-friendliness of Products
CANON ANELVA is aggressively promoting activities to reduce the impact on the environment
throughout the entire life cycle of the products that includes “manufacture“, “usage“, and “recycling“.

manufacture
Environmental impact
assessment of products
Reducing the use of environmentally
harmful substances
Energy saving
Resource saving
Space saving

CO2
reduction
duringoperation

Promotion ofenvironmentallyconscious
designEnvironmental safeguard
Reducing standby power consumptions
Low environmental impact processes

usage

Guaranteedstatement of
toxic substancesin products

recyclingӳ Environmental Activities
Introducing a part our of social
activities and contributions.

*40DFSUJDBUJPOGreen procurement
Environmental evaluation of the suppliers
Audit of contained materials
Building the data baseCollecting plastic bottle caps

Cleaning the headquarters
and factory surroundings2-5-1, Kurigi, Asao-ku, Kawasaki, Kanagawa 215-8550, JapanIUUQTBOFMWBDBOPOFO

No part of this document may be reproduced without the prior permission.
$BU/P&7*