Important Notice* September 20, 2011 update: Added precautions on replacement operation.

Update date: September 20, 2011
Issuance date: June 28, 2011
Canon ANELVA Corporation

Dear Customer Who Uses SPF/L-300，312，313，330，332 Sputtering System
Thank you for using Canon ANELVA products.
We announced a report “Inspection and replacement notice of timing belt for opening/closing lid ofSystem” to a customer who uses SPF/L-300, 312, 313, 330, and 332 through our homepage and othermeasures since June 2008. It has been three years since we informed it; however, there are some casesthat we are not informed of the current situation of those systems.
Applicable product
Small size sputtering systems in the following table, which were manufactured from 1980 to 2002.
SPF-300H

System model

EVP number

Manufactured date

SPF-312H
System Model

SPF-312H Special Model
SPF-313
SPF-330
SPF-332H
L-312S-F
L-313S-FH
L-332S-FH

A system model name and EVP number aredescribed on a “System Sub Name Plate" attachedon System rear bottom.

The above image is an example of SPF-332H.
The appearance is different, depending on a model.

QD-11-6626

ProblemIf a timing belt is not replaced for a long time on an applicable product, the timing belt may breakand cause a lid to fall off. If it is broken when the lid is opened, the fallen lid may pinch your hand or
arm and cause bruises or injuries.
Countermeasure
Canon ANELVA announced a product advisory for an applicable system being used for three years
or more without replacing a timing belt must stop its operation and replace its timing belt.
Replacement is available with additional charge.
Please refer to the “Lift Mechanism Inspection Manual” and inspect periodically for safe use of theSystem. Also, please bind the “Lift Mechanism Inspection Manual” to an instruction manual file to usefor daily inspection.
Even if no defect observed on such inspections, please make sure to replace the timing belt
periodically every three years for safe use of the System.
Precautions on replacement
Replacing a timing belt requires special skills and jigs; therefore, only our service engineers areallowed to operate such replacement. Please contact nearest service representatives for replacement
inquiries.
Canon ANELVA is not liable for a replacement which is not performed by our service engineer.
If you have a System without a lift locking mechanism
Since January 1994, a lift locking mechanism has been provided to a newly manufactured system toensure safety. This function prevents a lid to fall off when the lid is opened (at upper limit position).
Please consider to install a lift locking mechanism on this occasion as well (please contact us fordetails).
To the customers using the products in question, we extend our sincerest apologies for any
inconveniences resulting from this issue. To ensure that all Canon ANELVA customers can continue
using Canon ANELVA products with confidence, we will make every effort to ensure quality andrequest your continued support.
Contact information
Please contact us at following email.

E-mail: qcinfo@canon-anelva.co.jp

QD-11-6626

VT-521-0051-EN

SPF/L-300, 312, 313, 330, 332 Series
Sputtering System
Lift Mechanism
Inspection Manual

5SEP.

20. 2011

4JUN.

27. 2011

3

JUN.

17. 2007

2APR.

8. 2007

1DEC .

11 . 2007

EDITION

DATE

Copyright© 2012 by Canon ANELVA Corporation
All Rights Reserved.

LIFT MECHANISM INSPECTION MANUALFFOORREEWWO
ORRD
DThank you for using the System.
This Manual describes how to inspect the lift mechanism equipped on
SPF/L-300, 312, 313, 330, and 332 series sputtering system.
A lift mechanism eases opening/closing a top lid of a vacuum chamber. Aweight, as heavy as the vacuum chamber top lid, is connected with a timing
belt to balance the weight. A timing belt is a consumable product. Using it
without replacing for a long time causes it to deteriorate and may break insome occasions.
For longer and safe use of the System, please make sure to inspect the liftmechanism and the timing belt as described on the Manual.
If you have any inquires on the contents of this Manual, please contact thenearest service representatives or our sales representatives.

Applicable System
SPF-300H
SPF-312
SPF-313
SPF-330
SPF-332
L-312S-F
L-313S-FH
L-332S-FH

Inspection Overview
You need to visually inspect a timing belt.
The timing belt of a lift mechanism is located on rear side of the System.
Before inspection, check safety of the vicinity, including the wiring and pipes.
Other than visual inspection that you perform, there are inspection items that
Canon ANELVA service engineer need to perform. We recommend andrequest a periodic inspection once a year by our service engineer. Pleasecontact us for such an inquiry, according with your system maintenanceschedule.

Never touch the timing belt during its inspection.

1

VT-521-0051-EN

LIFT MECHANISM INSPECTION MANUAL

IInnssppeeccttiinngg LLiifftt M
Meecchhaanniissmm

Inspecting Timing Belt
Inspection Method
Visually check the timing belt if it has no trouble.

Inspection Standard
There should be no trouble on a timing belt, not limited to troubles listed on “TimingBelt Trouble Example” on the next section.

Inspection Cycle
Inspect daily, like before starting operation.

Replacement Cycle
Please replace it every three years basically.

Countermeasure“Timing Belt Trouble Example” is described on the next section.
It may not be applicable, depending on how you use the System. If any troubles
found on a timing belt, replace it with a new one.
Replacing a timing belt requires special skills and jigs; therefore, only ourservice engineers are allowed to operate such replacement. Please contact anearest service representative for replacement inquiries.
Canon ANELVA is not liable for any replacement operation by a person who
is not our service engineer.
・It requires handling heavy objects and carrying them (it requires two or more
people to operate). There are several operations which are dangerous andrequire a special training.
・Replacement requires a special jig.

Timing Belt Reference Drawing

VT-521-0051-EN

2

LIFT MECHANISM INSPECTION MANUALTiming Belt Trouble Example
１．Supporting fiber of a timing belt is worn out due to friction, and the rubber layer or corewire is exposed.

２．A crack occurred on rear rubber of a timing belt as the rubber is getting rigid and lessflexible.

３．A crack reaches from the base of a cog of a timing belt to the rubber layer.

４． A timing belt side surface is broken by friction.

５． A timing belt is not engaging with a pulley cog.

６． The color of a timing belt is changing from light green or yellow to brown.

3VT-521-0051-ENLIFT MECHANISM INSPECTION MANUALInspection of Lift Mechanism【Locations where a periodic inspection is necessary for safety】
A part: Check if there is any trouble on a timing belt.
B part: Check if the timing belt securing part (weight side and vacuum chamber side) and a screw of a counterbalancing weight are not loosening.

Lift mechanism overview
A partPlease check if a screw is not loosening B part
Timing belt securing part (weight side)

Please visually check atiming belt

A partPlease check if a screw is notloosening
Timing belt securing part (vacuumchamber side)

B partB partPlease check if a screw is notloosening
Counter balancing weight≪Timing Belt≫
ProductParts number

Timing belt high power modelN34050970

VT-521-0051-EN4

LIFT MECHANISM INSPECTION MANUAL

Proposal on Lift Locking Mechanism (optional item)
To a customer who owns a system without a lift locking mechanism;
Since January 1994, a lift locking mechanism has been provided to a newly manufactured system to ensure safety.
This function prevents a lid to fall off when the lid is opened (at upper limit position). Please consider installing alift locking mechanism on this occasion as well.

Locking Mechanism Reference Drawing Brief Version

How to use a locking mechanism

Locked with lifting
the vacuum
chamber lid

Vacuum chamber lid
Lift bracket

To close a vacuum
chamber lid, slide
the lift bracket tothe left and close
the lid.

Slide unit

5VT-521-0051-EN