Semiconductor Gas Detector
XPS-7II
Instruction Manual Keep this manual for easy reference.
 Carefully read this manual prior to use.

Instruction Manual No.
XPS-7IIET (04)

Table of Contents
1

Introduction
Safety Precautions
2 Package Contents
3 Sensor Unit Variations
4 Unit Components
5 Operation
5-1. Battery Installation
5-2. Sensor Unit Installation
5-3. Power on
5-4. Detection
5-5. Power off
6 Data Logging
7 Filter Element Replacement
8 Maintenance
9 Troubleshooting
10 Consumable and Optional Parts (separately sold)
11 Warranty
12 Disposal
13 Specifications

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1
3
3
4
7
7
8
9
10
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13
14
16
17
18
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19

1 Introduction
Thank you for purchasing the New Cosmos XPS-7II extractive-type portablesemiconductor gas detector. To ensure safe and reliable operation, please
read this instruction manual prior to use.
This product is intended for use in a semiconductor-manufacturing plant for the
early detection of a gas leak. It can detect various semiconductor
manufacturing gases just by switching the sensor unit.
This unit measures the gas concentration and simultaneously displays themeasurement on its display. If the gas concentration level reaches a preset
level, the unit will produce audio-visual alarms.
Carefully read this manual regardless of your experience with gas detectors.
Do not use the product for other than the intended purpose or in a manner notdescribed in this manual.

Symbols Used in this ManualThis manual uses Danger, Warning, Caution and Note symbols to draw
attention to procedures, materials, methods, and processes, which requireparticular attention.
DANGERWARNINGCAUTION
NOTE

Indicates an imminently hazardous situation that can
result in death or serious injury.
Indicates a potentially hazardous situation that may
result in death or serious injury.
Indicates a hazardous situation that may result inminor injury or property damage.
Provides advice/information on product handling.

Safety Precautions
Follow the precautions below to ensure safe operation:
WARNING

This product is not explosion-proof and should not be
installed in a hazardous area.

1

CAUTION

 This product is not drip-proof and should be kept awayfrom water.
 Avoid strong mechanical shock, impact or vibration to
the product, e.g., dropping or bumping. Failure to doso may impair its performance.
 Turn on the detector in clean air. Normal gas detection
is not possible, and product’s performance may becompromised if turned on in an atmosphere that may
contain target or interfering gases.
 The service life of the sensor unit is six months.
Before use, check that the sensor unit expiration date
has not been reached. Use of expired sensor may
cause inaccurate detection.
 Carry and use the detector with its face (LCD) facing
upward to keep the sensor vertical.

Follow the precautions below for storage of the product:
WARNINGCAUTION

Do not leave the product in high temperature andhumidity conditions for a long period of time. Doing so
may compromise its performance.
 Avoid rapid change in temperature/humidity. Failure
to do so may compromise the product’s performance.
 Remove the sensor unit and batteries, if unused orstored for an extended period of time. The sensor
unit can be kept ready for use if placed andenergized (aging for sensor stability) in the EC-7
sensor stocker (sold separately).
 To store the detector with the sensor unit installedinside, follow the precautions below:(1) The sensor unit should be kept in an uprightposition to prevent electrolyte leakage. Store thedetector with its LCD facing upward.
(2) The sensor unit is being energized while installedin the detector, even though the detector is off, as
long as the battery remains or power is supplied. Use
the AC adapter to keep the detector powered.
 If the pump is left unused for an extended period oftime, the grease inside the pump motor may harden,
causing the motor to fail to run. Even if the product isunused for an extended period of time, turn on thedetector once every six months to check whether itsucks air in.
2

2 Package Contents
A standard package consists of following items. If any items are missing or
damaged, please contact New Cosmos or its authorized representative forreplacement.
Item
QuantityGas detector
1Shoulder strap
1
Gas sampling tube
1
Replacement filter element
2
Alkaline AA battery
4
Instruction manual (this document)
1
Inspection certificate
1

3 Sensor Unit Variations
Model

Target gas

Full scale

Alarm set value
1st stage

2nd stage

XDS-7NH

NH3

Ammonia

100ppm

12ppm

25ppm

XDS-7SH

SiH4

Silane25ppm

2.5ppm5ppm

XDS-7DC

SiH2Cl2

Dichlorosilane

25ppm

2.5ppm5ppm

XDS-7AH

AsH3

Arsine250ppb

25ppb

50ppb

XDS-7PH

PH3

Phosphine

1ppm

0.15ppm

0.3ppm

XDS-7BH

B2H6

Diborane

500ppb50ppb

100ppb

XDS-7SE

H2Se

Hydrogen selenide

250ppb

25ppb

50ppb

XDS7GH

GeH4

Germane1ppm

0.1ppm

0.2ppm

XDS-7CL

Cl2

Chlorine

5ppm

0.25ppm

0.5ppm

XDS-7CFClF3

Chlorine trifluoride

1ppm

0.05ppm

0.1ppm

XDS-7HC

HCl

Hydrogen chloride

25ppm

2.5ppm5ppm

XDS-7HF

HF

Hydrogen fluoride

10ppm

1.5ppm

3ppm

XDS-7HB

HBr

Hydrogen bromide

10ppm

1.5ppm

3ppm

XDS-7NONO

Nitrogen monoxide

100ppm

12ppm

25ppm

XDS-7HS

H2S

Hydrogen sulfide

50ppm

5ppm

10ppm

XDS-7COCO

Carbon monoxide

250ppm

12.5ppm

25ppm

XDS-7DS

Si2H6

Disilane

25ppm

2.5ppm5ppm

XDS-7F2

F2

Fluorine

5ppm

0.5ppm

1ppm

XDS-7OZ

O3

Ozone

1ppm

0.05ppm

0.1ppm

XDS-7NF

NF3

Nitrogen trifloride

100ppm

5ppm

10ppm

For the target gas not in the table, please consult New Cosmos or its authorized representative.

34 Unit Components
Main unit

Item

Component name1Green POWER LED

2

Amber TROUBLE LED

3

Red ALARM LED

4

LCD

5

Front cover

6
7
8
9
10
11

Audio opening
Gas inlet port
Gas outlet port
Adapter connector
Battery coverSensor cover

12

Sensor window

13

Red battery LED(behind the front cover)Description/Function
Lit while in normal operation mode (gas-monitoringmode) and flashes while in warm-up cycle
Flashing indicates an internal failure is present
When the gas concentration level exceeds the 1ststage alarm set value, the ALARM LED starts flashing,
and when it exceeds the 2nd stage alarm set value, the
ALARM LED flashes faster
Displays alarm notification, numeric gas concentration
value, gas concentration on bar graph, sensor fault
status, flow rate status, and battery level
Pull by holding it by the sides, then slide down toaccess the operation buttons
Open for audio
Connects to the gas sampling tube. Outside dia.6mm
Discharges sampled gas. Outside dia.6mm
Connects to a dedicated AC adapter
Cover for battery compartment
Open for sensor unit installation
Check the sensor unit’s model, target gas, and fullscale thru this window
Lights up when batteries are installed and thebrightness increases when the battery is close toempty. Lights up when the cover is open while thedetector is off
4Operation buttons(behind the front cover)

Item
1

3
4

Component name
POWER button
AL button(to check the alarm set
values)BZ.STOP button
ZERO button

5

CN connector

6

Logger button▲(UP) and ▼(DOWN)
buttons

2

7

LCD
Flow rate low icon
Lights up when flowrate is low

Description/Function
Press and hold to turn on/off the detector
Each press cycles through “1st stage alarm set
value”, “2nd stage alarm set value”, and current gas
concentration value on the LCD
Press to mute the alarm audio
Press and hold to perform a zero adjustment
Connects to the CA-7 communication adapter(sold separately) to collect logging data
Used for data logging
Used for settings (e.g., log starting time entry)

1st and 2nd stage gas alarm icons
Lights up when the gaslevel reaches preset
Sensor fault icon
alarm value
Lights up when a sensor fault is detected
Flow rate icon
Spins during normal operation and stops when
flow rate is low
Gas concentration on bar graph
One bar represents 5% of the full scale value.
The bar graph value increases from left to rightwith the far right being full scale value
Numeric gas concentration
Battery level indicator
Full

Logging icon
Lights up when data logging is in progress.

5

Empty (flashing)Gas sampling tube

Tube adapter(connects to the gas inlet
port of the detector)

Filter case(houses an FE-112 filter element)

Short probe(gas suction inlet)

Tube (1m)

Installation: Push and insert the tube adapter of the gas sampling tube into
the detector’s gas inlet port. The tube adapter is automatically locked andsealed to the port when inserted. Ensure that it is securely connected bypulling it slightly.
Removal: Press and hold the release ring to unlock the tube adapter. While
holding the release ring, pull out and remove the tube adapter from thedetector’s gas inlet port.
Press and hold the release ring
InsertPull the tube adapter
Tube adapter

65 Operation
Perform a routine check (page 14) before use. Normal gas detection may not
be possible without check, which will then fail gas leak detection.
 Turn on the detector in clean air. Normal gas detection is
not possible, and product’s performance may becompromised if turned on in an atmosphere that may
contain target or interfering gases.
 Carry and use the detector with its face (LCD) facing
upward to keep the sensor vertical.

CAUTION5-1. Battery Installation(1) Lift and unlock the snap latch on the battery cover. Pull the cover forward.
The cover is now removable.
(2) Install the four alkaline AA batteries (provided) into the battery
compartment. Correctly install by referring to the polarity marking inside
the compartment.
(3) Reinstall the battery cover and lock the snap latch.

Battery compartment

Snap latch

Battery cover

WARNINGCAUTION

Remove all contaminants (e.g., water, dust) from theproduct surface before opening the battery cover. The
entry of contaminants may cause device failure.
 Only use new batteries of the same brand and type forreplacement.
 Replace all the four batteries at the same time.
7Replace the batteries when(a) only one square  (battery level indicator, page 5) is left
flashing, indicating empty battery, while the unit is on,(b) pressing the POWER button does not turn on the unit,or(c) the red battery LED’s brightness increases, indicating
empty battery like (a) above, while the unit is off.

NOTE

5-2. Sensor Unit Installation(1) Lift and unlock the snap latch on the sensor cover. Pull the coverforward. The cover is now open (this cover cannot be detached fromthe unit).
(2) Install a sensor unit in the detector by engaging with the connector andsensor port on the detector.
(3) Reinstall the sensor cover and lock the snap latch.

Sensor unit

Sensor port
Connector

Snap latch

Sensor cover8

CAUTION

 Normal gas detection is not possible, if the sensor
unit is not securely connected to the detector,
causing poor airtightness.
 Energize sensor units with an EC-7 sensor stocker(sold separately) before use. Normal gas detection is
not possible if the sensor units are not sufficiently
energized. Insufficient energization may cause asensor fault alarm.
 Before regular sensor unit replacement, fullyenergize a new sensor unit (e.g., ex-factory unit) byinstalling it in an EC-7 sensor stocker (soldseparately) or this detector.
 Only use XDS-7 series sensor unit for this detector.
Others (e.g., CDS-7, COS-7, CHS-7) cannot beused.
 While installed in the detector, the sensor unit isbeing energized, even though the detector is off, as
long as the battery remains or power is supplied. Use
the AC adapter to keep the detector powered if thedetector is stored with the sensor unit inside.

5-3. Power on(1) Press and hold the POWER button. The unit gives off a long beep. Thenthe green POWER LED starts flashing. The warm-up cycle (30-second
self-test followed by automatic zero adjustment) starts.
(2) When the warm-up cycle is completed, the flashing POWER LED
becomes steady, indicating that the unit is ready for detection.
CAUTION Zero adjustment (zeroing) is performed automaticallywhen the detector is turned on. Turn on the detector inclean air to prevent incorrect zero adjustment. Incorrect
zero adjustment will cause inaccurate detection.
 After turning off the detector, leave it for more than one
second before turning it on again.

95-4. Detection
Put the short probe to the suspected leak point. When a gas leak is detected,
the gas concentration value will be displayed on the LCD. If the gas
concentration level exceeds the preset level, the red ALARM LED starts
flashing and the detector starts beeping as shown in the table below.
The higher the gas concentration, the faster the detector beeps. Similarly, thecloser the detector is to the leak point, the faster it beeps. When theconcentration reaches the full scale value, a steady tone is played.
Gas concentration exceeds

Red ALARM LED

Audio alarm

1st stage alarm set value

Flashes

No sound2nd stage alarm set value

Flashes fast

Beeps fast

F.S. value

Flashes faster

Steady tone

CAUTION Avoid liquid seepage (e.g., water). Liquid entering thegas sampling tube or gas detector will impair proper gas
detection, leading to a product failure.
 If the zero point drifts due to exposure to highconcentration gas, etc., power cycle the detector orpress and hold the ZERO button to perform a zeroadjustment. Ensure that the zero adjustment is done inclean air.

5-5. Power off
Before turning off the detector, ensure that the reading shows zero in clean air
by running the detector in clean air. Press and hold the POWER button to turnoff the detector.
CAUTION

After detection of adsorptive gas (e.g., HF and F2),
replace the filter element (FE-112) with a new one.
Correct detection is not possible if the filter element isdirty.

10

6 Data Logging
The detector can log up to 22 hours of the measurement data. The log data canalso be transferred to a pc by using data logger kit (sold separately, page 17).
NOTE

 Once data logging starts, the peak concentration value islogged every 10 seconds.
 The oldest events will be deleted to make room forthe newest when the unit runs out of room for new ones.
 Pressing the POWER button to turn off the detector during
data logging will automatically save the logged data.
However, logged data will not be saved in case of power loss
(e.g., power outage, battery removal).
 Logging date cannot be entered.
 Refer to the XPS7L data logger software’s instruction manual(separate document) for the procedure to transfer log data to
a pc.
First, enter the log starting time and then press andhold the ZERO button to start logging.

(1) During normal operation, press the ▼ button.
“LoG” will appear on the right bottom corner ofthe LCD along with the log starting time entry
screen.

(2) Press the logger button. Each of the four digits
will flash one at a time. Enter the value for the
flashing digit with the ▲and ▼ buttons. Pressthe logger button for confirmation. Repeat thisstep four times to enter the four digits (logstarting time).
For example, when you want to record 1:20 pm
as the starting time, enter “13.20.”

11

(3) Press and hold the ZERO button to start logging.
“MNT1” appears on the left bottom corner of the
LCD while logging is in progress.

(4) To end logging, press the BZ.STOP button.
“MNT1” disappears and logging ends.

NOTE

Normally, the battery level indicator      appears on theright bottom corner of the LCD. Press the ▲or ▼ button a few
times and the values shown below will appear in place of thebattery level indicator. These values are just the ex-factory
parameters and are not for customer use. They do not affect the
product operation or performance.

Pressing the ▲or ▼ button cycles through the following values:

127 Filter Element Replacement
Replace the filter element with a new one, if it is dirty or wet.
(1) Turn the retainer and short probe as a whole counterclockwise to remove
them from the filter case.
(2) Remove the O-ring from the filter case.
(3) Replace the filter element with a new one.
(4) Reinstall the O-ring back onto the case.
(5) Reinstall the retainer and short probe to the filter case.
Filter case
Filter element (FE-112)
O-ringRetainer

Short probe

CAUTION To prevent the entry of contaminants (e.g., dust, water),turn off the gas detector before replacing the filter
element.
 Ensure that the filter element is installed correctly. Any
misalignment may compromise the detection andwaterproof performance of the product.
 Contact New Cosmos or your New Cosmos
representative for repair if water is observed inside thedetector. Normal gas detection is not possible if water
enters the detector through the filter element.

13

8 MaintenanceRoutine Check (pre-use check)
Perform a routine check before each use.

Detector

Gas sampling tube

Check item

Action Check the gas sampling tube
for any damage or wear Check that the tube issecurely connected to thedetector; check for loose
connections

 Replace with a new one ifworn or damaged

 Check that the filter element in
the filter case is clean and dry Check the filter element for
clogging or discoloration

 Replace with a new one if
dirty, discolored, or clogged Check the battery levelindicator. If only one square is left flashing, the battery isempty

 Replace all the four batteries
with new ones (of the samebrand and type), or connect the AC adapter

 Check that the tube adapter issecurely connected to thedetector’s gas inlet port

 If disconnected or loose, pushand insert the tube adapter
into the inlet port

 Reconnect if any loose
connections are foundAnnual Inspection
 Contact New Cosmos or your New Cosmos representative to perform anannual inspection. Perform it at least once a year to maintain the productaccuracy.
 The sensor unit replacement cycle is six months.
 Remove the sensor unit from the gas detector before shipping forrepair/inspection.
 Sensor unit should be kept in an upright position to prevent electrolyte
leakage. When shipping the sensor unit, the shipping box’s orientation
should be taken care of.

14

Important Notice for Annual Inspection
This product is a precision instrument. It is vital to perform periodical
inspections to maintain the detector’s performance and ensure safety. It ishighly recommended that a maintenance contract with a local New Cosmos
representative be made for the performance of scheduled annual inspections(once a year at least).

Cleaning
If the detector is dirty, wipe it off with a soft dry cloth or with a moist cloth. Do
not use any alcohol or detergent.

15

9 Troubleshooting
Before contacting us for service repair, perform basic troubleshooting using thetable below. If the detector locks up (cannot be turned off), remove all batteries.
After a few minutes, put the batteries back in and turn on the detector.
Symptom

Cause

ActionRemove thebatteries andreinsert them inthe correctorientation
Replace thebatteries withnew ones

Batteryorientation
incorrect
Pressing
POWER button
does not turn on
the power

Flow rate icon
stops spinning(page 5),indicating a low
flow rate

Sensor fault icon
is lit (page 5),
indicating asensor error

Battery depleted

Reference

5-1. Batteries
Installation(page 7)No sensor unit
installed

Install the sensor
unit

5-2. Sensor Unit
Installation(page 8)Filter clogged

Replace the filter
element with a
new one7. Filter Element
Replacement(page 13)Straighten the
tube or remove
the obstruction in
the tube
Fully energize
sensor unit, thenreinstall
Replace thesensor unit witha new one

Sampling tube
bent or closed
Sensorinsufficiently
energized
Sensor unit
expired16―

5-2. Sensor Unit
Installation(page 8)

10 Consumable and Optional Parts (separately sold)Part Name

Sensor unit

Filter element (x 10 pcs)

Model

Remarks(XDS-7 series)

Sensor cartridge
Refer to 3. Sensor Unit
Variations list (page 3) for
modelsContact Cosmos or your
New Cosmos representative
for model selection

FE-112

AC adapter *(100-240VAC/6VDC)―

Sensor stocker

EC-7

Data logger software *XPS7LCommunication adapter *CA-7

Serial cross cable *Install in the filter case
Dedicated AC adapter whenusing 100-240VAC
Can energize up to six
sensor units at one time

Required to transfer log data
to a pc

KRS-L09-2K* Does not comply with CE marking.
The sensor unit’s expiration date is mentioned on its pouch. The warranty
period for other consumables is one year from the date of purchase. The
warranty scope is the same as that of the gas detector.

17

11 Warranty
The warranty period is one (1) year from the date of purchase.
You are entitled to the limited warranty, if the product malfunctions due to a
manufacturing defect during normal use in accordance with the instruction manual,specifications and labels.
Warranty Scope
If the product fails or is found to be damaged due to a manufacturing defect during thewarranty period, and used in accordance with the instruction manual and specifications,
we will provide a free replacement and repair service. This warranty covers the New
Cosmos product/parts only and not third-party product/parts.
Warranty Exclusions
The following will be repaired at the cost of customer even during the warranty period.
(1) Failures and damages incurred by incorrect use, deliberate acts or negligence of
the user.
(2) Failures and damages caused by disaster, earthquake, storm and flood, lightning,
extreme climate, abnormal power supply voltage, excessive electromagnetic
interferences, or other acts of God.
(3) Failures and damages resulting from repair and/or modification by non-New
Cosmos certified technicians.
(4) Consumables and failures and damages resulting from improper consumablereplacement.
(5) Other failures and damages not attributable to the manufacturer.

12 Disposal
Dispose of a used gas detector, sensor or battery as industrial waste in accordancewith the applicable local laws and regulations.
Battery disposal
Used batteries must be disposed of in accordance with the applicablelaws and regulations. The Waste Electrical and Electronic Equipment(WEEE) directive (2012/19/EU) is intended to promote recycling ofelectrical and electronic equipment and their components at end oflife. This symbol (crossed-out wheeled bin) indicates separate collectionof waste electrical and electronic equipment in the EU countries. This product uses
batteries. Batteries must be recycled or disposed of properly. At the end of its life,
batteries must undergo separate collection and recycling from general or household
waste. Please use the return and collection system available in your country for the
disposal of the batteries.

18

13 Specifications
Target gas
Detection principle

Gas sampling method
Detection range
Gas concentration
display
Indication accuracy *1

Semiconductor manufacturing gases
Electrochemical
Electrochemical (catalyst conversion) for
XDS-7NF (NF3 detection)
Extractive type (pump)
As per delivery specifications
Four-digit on LCD±10%F.S. except for XDS-7NF-30%F.S. to +10%F.S. for XDS-7NF
Response time *1
T60: Less than 60 seconds
Power supply
Alkaline AA battery x 4pcs or
Dedicated AC adapter (100-240VAC/6VDC) *3
Continuous operating
More than 12 hours except for XDS-7NF
time*2More than 8 hours for XDS-7NF(by alkaline AA batteries (Toshiba LR6AN) at
20C, with no gas alarm)
Operating temperature
0 to +40ºC, 30 to 85%RH
and humidity
No condensation. No rapid change intemperature/humidity
Dimensions
Approx. W62 × H150 × D128 mm (excluding
protrusions)
Mass
Approx. 1.3 kg
Compliance
EMC directive (EMC: 2014/30/EU/SI 2016
No.1091) and RoHS directive( 2011/65/EU+(EU)2015/863/SI 2012
No.3032 ) *3 *4*1. Under identical conditions.
*2. The operating time (battery life) may vary depending on environmentand conditions of use, storage period, battery manufacturer etc.
*3. AC adapter, data logger software, communication adapter, and serial
cross cable (page 17) do not comply with CE marking.
*4. There are two types of EC-7 sensor stocker, global and domestic (foruse in Japan). Global type is CE-marked.
19This page is intentionally left blank.

20

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21

Additional copies of this instruction manual may be purchased.
Contact New Cosmos or its authorized representative for ordering.
The contents of this manual are subject to change without notice.

Authorized representative:

Manufacturer:
NEW COSMOS ELECTRIC CO., LTD.
2-5-4 Mitsuya-naka, Yodogawa-ku,
Osaka 532-0036, Japan
www.newcosmos-global.com/

XPS-7ⅡET(04)