Plant and Office Initiatives for the Environment
Through the careful and sustained efforts of each of our employees, the TEL Groupis proactively undertaking various initiatives to help prevent global warming, conserve
resources, and reduce waste.

Measures to Help Prevent
Global Warming

CO2 Emissions from Energy Consumption
(t)

7,405

110,695 113,169 116,077
8,335
7,335
6,449

80,000102,977

104,246 105,834 107,742

40,00016.4

110,382

120,000

Reducing Energy Consumption
In accordance with Tokyo Electron’s Environmental
Commitment, the TEL Group aims to achieve a 50% reduction
in CO2 emissions per unit of sales1 by fiscal 2015 comparedwith the base year of fiscal 2008. In order to achieve thistarget, during the second half of fiscal 2010, measures weretaken at our manufacturing sites to enhance clean room

22.80’06

energy efficiency in order to reduce energy consumption,

13.0

12.5

’07

’08

(%)

90,665
8,994
81,671

30
20

21.7

10’09

’100(FY)

CO2 emissions (Japan)
CO2 emissions (overseas)
Energy use per unit of salesand investments were made with the expectation of achieving
a reduction in CO2 emissions of approximately 3,000 tons.

Breakdown of CO2 Emissions fromEnergy Consumption
2% 1% 1%
3%
3%

Meanwhile, efforts made at our offices include installinghigh-efficiency lighting systems, appropriate control ofair-conditioning temperatures, and reducing the power
consumption of office equipment. Outside Japan, Tokyo

Electricity
Heavy oil
Kerosene

Electron U.S. Holdings, Inc. is implementing environmental
measures that include purchasing green

FY2010

Processed natural gas
LPG
Light oil, others

90,665 telectricity from sustainable sourcesof energy such as wind power. InFebruary 2010, our Tohoku Plant (Tokyo90%

Electron Tohoku Ltd.) was awarded theChairman’s Prize by the Tohoku Seven
Tohoku Plant was awarded theOutstanding Energy-Efficient
Factory Prize.

Electricity Consumption

Prefecture Committee to Promote
the Use of Electrical Power for an
Outstanding Energy-Efficient Factory.

Energy Consumption and CO2 Emissions(million kWh)

300

258.8
19.2

270.1
9.9

249.6
12.5

231.8
16.0

200
260.2

Regarding energy consumption in fiscal 2010, our electricity
usage declined by approximately 7% and heavy oil usage

263.7
16.5

247.2

237.1

239.6

100215.8

dropped by approximately 8% compared with fiscal 2009 due
to energy conservation measures conducted in all regions anda decrease in production activities. CO2 emissions from energy

0’06
Japan

consumption decreased significantly by more than 20% due

’07

’08

’09

’10(FY)

Overseasin part to an improvement in CO2 emissions factors by ourGreenhouse Gases Other Than fromEnergy Consumption (Japan)

electrical power provider. CO2 emissions (energy use) per unitof sales decreased by more than 5%.
We will continue with our activities so as to minimize
increases in CO2 emissions when production increases.

(t -CO2 2)

21,00630

20,00015,888Reducing the Use of Greenhouse Gases
Other than CO2
In process development of products and evaluatingprocess (e.g., dry etching and cleaning processes) we use

770
12,643

10,6104,681

hexafluoride (SF6), which are greenhouse gases. In fiscal 2010,
we used 17,743 tons of greenhouse gases (CO2 equivalent). We

3,236

and made partial adjustments to our figures.

0TOKYO ELECTRON

Environmental and Social Report 2010

8,486

1112,231

4,350
3,506

3,607
1,620
’06’07HFCsPFCs

1 CO2 emissions (energy use) per unit of sales: CO2 emissions from energy consumption/sales
We use adjusted emission factors for individual electric power providers for the emission factor forelectricity consumption in Japan in fiscal 2010. For the emission factor for electricity consumption
overseas, we use estimated factors calculated by the Federation of Electric Power Companies of Japan
based on values published by the International Energy Agency (IEA).

20

13,863

3,106

10,000hydrofluorocarbons (HFCs), perfluorocarbons (PFCs) and sulfur

revised our calculation methods for SF6 and PFCs in fiscal 2009

17,743
165

3,204

4,052

3,045

2,580

’08

’09

SF6

3,926
1,421
’10 (FY)

Others2 t-CO2: a unit indicating the amount of CO2 and othergreenhouse gases emitted, absorbed, or stored, whichis converted to the weight of CO2 with an equivalentgreenhouse effect.

Our Approach to Resource
Conservationwater. In fiscal 2010, water consumption fell by approximately

The TEL Group is working to minimize our use of limited

have also installed automatic faucets in restrooms and otherresources. Specifically, we are reducing the use of copierfacilities. These touch-free automatic faucets prevent water

paper and stationery and implementing green procurement

waste by automatically shutting off the supply when the user’s

practices, giving preference to environmentally conscious

hands are removed from the sensor range.

15%— mainly because of lower production. Our plants

products.
We have also replaced printer toner cartridges for use in
our offices with cartridges made from recycled materials andcooperated with the manufacturers in recovering end-of-life
cartridges. At some offices, we have established an intranet-Water Consumption(Thousand m3)

1,200

based system, under which unused stationery can be used byother departments, encouraging the reuse of resources acrossthe organization. In addition, active efforts are made to donate

800

circulars. As a result, the Group’s total use of copier paper

599

1,180482

1,13965599

1 967
49575

1504

HIGHLIGHT

copy at a reduced size, and to digitize information and internal

111
22506
400

Efforts to Reduce the Use of Paper
Our employees are encouraged to use duplex copying, to

1,161
1,095
115
92

excess office supplies, shelves, and other unused items tolocal government bodies and non-profit organizations.

0382

429

’ 06

’ 07

Industrial water
Overseas use

531

’ 08
Tap water

498

413

’ 09

’ 10(FY)

Groundwater

which represents a reduction of more than four million sheetsin the year. Moreover, since fiscal 2010 we have expanded thescope of data collection for our activities by adding data frombusiness sites in Japan.
We are encouraging the use of environmentally friendly
paper and introducing resource-conserving activities byintroducing products such as paper cups made from abamboo-based material. We are also working to raisebring their own cups to work.

Tokyo Electron and ONYONE Inc. have jointly
developed a revolutionary clean suit (dust-resistantclothing) that is both comfortable and dust-resistant.
In order to develop a work suit that is comfortable

Efforts to Reduce Water Consumption
To reduce water consumption, our manufacturing plants
have installed water recirculating systems to reuse coolingto wear, especially while working on
equipment manufacturing in clean

EHS REPORTemployee awareness so that they use fewer paper cups andJoint Development of Clean
Suits That Are Both Comfortable
and Dust-resistant

MANAGEMENT REPORT

in fiscal 2010 dropped by more than 10% over fiscal 2009,

field service bases and training centers to that for our main

Plant and Office Initiatives
for the Environment

Initiatives to Conserve Resources

rooms, the materials, design, andsewing techniques used for theclothing were reviewed and altered.

Copier Paper Consumption
100,000
85,852
16,038dramatically minimized the discomfort

94,127
16,135that conventional clean suits impose

84,419on wearers in a number of ways that

13,483include controlling the temperature andhumidity inside the clothing, providing

50,00069,814

77,99270,936more room in the suit, and making it
30,0098,647
21,3620’06
Plants’ 07
Office facilities’ 08

SOCIAL REPORTThe newly-developed suit has(Thousand sheets)’ 09

25,721
11,508
14,213’ 10 (FY)easier to put on and take off.
With this new suit, it is anticipatedthat air-conditioning temperatures in clean
rooms can be set 2ºC higher in summer,
which will contribute to saving energy.

21Plant and Office Initiatives for the Environment

Initiatives for Reducing Waste
Our Approach to Waste Reduction
and Recycling

Breakdown of Waste (Japan)

The TEL Group is working hard to reduce and recycle itswaste. We work according to a clear policy: minimize waste

1%

first and foremost, recycle whatever waste is generated to the4%6%greatest extent possible, and dispose of non-recyclable waste

7%

in a proper and responsible manner.
In recent years, landfill costs have surged due to a9%
FY201010,090 t

12%

shortage of sites, which means that reduced waste also61%

leads to reduced costs. We separate recyclable waste from

Liquid waste
Metallic/product waste
Plastics
Paper
Wood scraps andpackaging materials
Drink containers
Othersnon-recyclables, use new manufacturing processes that do
not involve waste generation, monitor the qualifications ofcontract waste disposal companies, periodically review final
waste disposal practices, and also focus on educational

Zero Emissions

activities related to the sorting of waste and other topics.

The TEL Group defines plants where less than 2% of waste

Some business sites have begun using electronic manifests1
to ensure proper management of waste materials.

generated is incinerated or put into landfill as “zero emission

1 Electronic manifest: a system in which the flow of industrial waste is
managed via a communications network linking information processing
centers, companies generating the waste, waste collecting andtransporting companies and waste disposal companies, instead of theconventional paper-based control manifest.

plants.” In fiscal 2010, all of our manufacturing plants inJapan achieved zero emissions as the result of efforts torecycle and reduce waste, and we will continue to promotezero emission activities across the entire group.
Recycling Rate for Industrial Waste fromTEL Group Plants in Japan

Volume of Waste Generated andRecycling Rates
In fiscal 1999, the TEL Group set the target of increasing its
average recycling rate2 to 95% by fiscal 2006. As a result ofrecycling measures, we achieved a recycling rate of 96.1% infiscal 2005, and 97.3% in fiscal 2010. Compared to the fiscal

Plant

Tohoku Plant
Miyagi (Matsushima) Plant
Yamanashi Plant (Hosaka area)
Yamanashi Plant (Fujii area)

2009 figures, incinerated and landfill waste fell by 4.2% andKoshi Plant

total waste (including recycled waste) decreased by 6.3%. The

Ozu Plant

Recycling rate

98.6%
99.8%
100%
100%
100%
100%

largest percentage of waste generated by the Group comesfrom liquid waste resulting from the chemicals used in ourproduct development and evaluation processes, but 99% of
this liquid waste is currently being recycled.

Environmental Training Video
Recycling Rate and Generation ofIncinerated and Landfill Waste (Japan)
(t)

96.4

500

469

97.3

97.3

97.0

97.3

Our Yamanashi Plant has produced an environmental(%)

100environmental education by366

showing basic environmental
288300276

50200

actions such as turning
off electricity (switchinglights off at lunch time andswitching office equipment

1000

introduces the Yamanashi Plant’s energy conservation
and waste management activities. The video aids our

414

400

training video for newly assigned employees. This video

’06

’07

Incineration and landfill

’08

’09

’100(FY)

Recycling rate

2 Recycling rate: recycled amount ÷ amount of waste generated/100

off at the end of the businessday), maintaining set airconditioning temperatures,and encouraging the use of
duplex printing, as well as
rules for waste disposal.

22TOKYO ELECTRON

Environmental and Social Report 2010

Environmental training
video

Our Approach to the Management ofChemical Substances

The TEL Group is currently storing two decommissioned

The TEL Group uses chemical substances mainly inand secure manner in accordance with legal requirements.

transformers and four capacitors that contain PCB in a strict

developing and manufacturing products. In developing

Handling of Substances Regulated as Class I
Designated Chemical Substances underthe PRTR Act (Japan)

products, whenever we adopt new chemical substances thathave not been used before or use chemical substances ina way that is different from their traditional usage, we first(kg)19,761

20,000closely examine the development facilities and methods,

Plant and Office Initiatives
for the Environment

Management of Chemical Substances

4,578

and then assess the environmental and operational risks
associated with the use of the substances. We do not begin

15,000

1,221

using the substances until all the necessary measures have
10,000been implemented. We are also replacing dangerous and

8,188
577

harmful chemicals used in the manufacturing process withsafer substances.

9,693
1,607
1,459
1,200

6,285
847
1,225

4,118

5,021

5,427

3,977

’06

’07

’08

’09

’10236(FY)

Hydrogen fluoride and its water soluble salts
Ethylene glycol
XyleneOthersAmounts of Specific Chemical Substances in the Environment
and Promotion of Improvements to the Management Thereof(PRTR3 Act), we identify the amounts of regulated substances

HIGHLIGHT

4,811
0In accordance with the Act on Confirmation, etc. of Release

2,108
1,359
3,962

2,800

5,000Compliance with the PRTR Act

9,844

12,450Material Balance of Chemical Substances
Regulated under the PRTR Actused, discharged and transferred, and rigorously control thesesubstances. This applies particularly to hydrogen fluoride,

Handled: 6,285 kg/year

glycol, which is primarily used as a refrigerant for cooling water.
After use, hydrogen fluoride and ethylene glycol waste is either
disposed of by an external contractor or disposed of in an
approved manner within our premises. In addition, in accordancewith the revised PRTR Act, in April 2010 we began identifying theWaste:

2,896 kg/year
Transferred
to sewage:

Released intothe air:

0 kg/year

amounts of newly regulated substances used, discharged andOn-site
landfill:

0 kg/year

transferred and we will continue to properly manage all the risks

Removed:

0 kg/year

Released intowater:

0 kg/year
2,073 kg/year

associated with the use of chemical substances.

MANAGEMENT REPORT

which is primarily used for cleaning test wafers, and ethylene

Recycled:

1,285 kg/year

Based on the Act on the Proper Treatment of PCB Waste andProducts: 31 kg/year

the Waste Disposal and Public Cleaning Acts, the TEL Group
reports annually on the storage, management, and disposalof waste containing polychlorinated biphenyl (PCB) to thegovernor of the prefectures in which our plants are located.

3 PRTR (Pollutant Release and Transfer Register): under the PRTR system,
the use of chemical substances that may be hazardous to human healthand the ecosystem, their release into the environment, and their transfer(contained in waste) outside of the business premises are identified,tabulated, and disclosed.

EHS REPORTPCB Storage

Input and Output (FY2010)
Change fromprevious year

231.88 million kWh(-7.1%)

Total product shipment 13,105 tons(-12.5%)

Gas

1.17 million m3(-2.2%)

CO2 emissions fromenergy consumption 90,665 tons(-21.9%)Fuel

1,976 kl(-14.8%)NOx emissions

10.1 tons(-9.0%)

Waste water

957,000 m3(-15.1%)

Water

967,000 m3(-15.1%)

Waste

10,090 tons(-6.3%)

Electricity

Chemical substances(regulated as Class I designated
6.2 tonschemical substances under the PRTR Act)

Paper (copier paper)

102 tons

The Tokyo
Electron Group(Japan and overseas
business sites)(-36.1%)

Recycled amount

9,814 tons(-6.4%)(-15.0%)

Amount of waste
incinerated or put in landfill 276 tons(-4.2%)SOCIAL REPORT

Change fromprevious year

23