FOR THE MASS FLOW CONTROL OF ALL KINDS OF GASESTC Series
THERMAL MASS FLOW CONTROLLEROUTLINETC series are thermal mass flow controllers, a combination of thermal
mass flowmeter and control valve.
TC automatically controls the mass flow rate of various kinds ofgases with high accuracy. General purpose of TC-1000 up to 0.99MPa
and high pressure version of TC 2000 up to 10MPa are available.

FEATURES❏ WIDE FLOW RANGE
Minimum 0 to 5mL/min(nor), Maximum 0 to 500L/min(nor) (0 to50mL/min(nor) to 0 to 100L/min(nor) for High pressure version)❏ HIGH ACCURACY±1% F.S. control accuracy.
❏ QUICK RESPONSE
3 sec. response for 98%❏ FREE FROM PRESSURE AND TEMPERATURE VARIATION Negligible ZERO and SPAN drift for pressure and temperature.
❏ HIGH FUNCTION
Theoretically, Mass flow measurement.

its pressure and within reasonable range of temperature, it can beobserved to be as stable.
Thus, by measuring the heat transfer through bridge output, the mass
flow rate of the gas can be measured. The output signal from thebridge circuit is amplified to 0 to 5 V DC and sent to indicator and ascomparison circuit. At the comparison circuit, the output is comparedto the external setting signal. The control valve is actuated to open
or to close to make the output and setting signal equal. The control
valve has an electromagnetic type actuator for Normal close action.

OPERATION PRINCIPLE
The gas to be measured is directed to by-pass sensing path by flow
restriction. At the by-pass sensing path, two resistance coils arewound which consist a bridge circuit with resistance circuit in electriccompartment.
In case of no flow passing through the by-pass sensing path, theTM-1400

bridge circuit is in balanced condition.
When the gas moves, the heat at the upstream coils is transferred toFLOW SETTINGSIGNAL

FLOW SIGNAL

downstream coil and thus upsetting the original heat balance.

±15 V DC

Then, the bridge circuit outputs electric signal. Theoretically, the heattransfer is proportional to the moving mass of the gas to be measured

AMPLIFIER CIRCUIT

and its specific heat. The specific heat of the gas is not affected by

COMPARISON CIRCUITCONTROL VALVE

BRIDGE CIRCUIT
BY-PASSSENSORSPRINGGAS INLETGAS OUTLETRESTRICTIONORIFICETG-F2083-E03
4th edition Feb 2024 K
1st edition Apr 2021 K

TC THERMAL MASS FLOW CONTROLLER

TC-1000

GENERAL PURPOSE THERMAL MASS FLOW CONTROLLER

MODEL CODE-FLOW RANGE

TC-1

STANDARD SPECIFICATIONS
--

TYPE

TC-1100

TC-1200

5mL/min(nor) to
10L/min(nor)

10 to 20L/min(nor)0.06 to 0.3

0.06 to 0.3

100

MAX

10L/min(nor)

200

MAX

20L/min(nor)FLOW RANGE(FULL SCALE)

300

MAX

80L/min(nor)FLOW CONTROL RANGE

350

MAX

100L/min(nor)

400

MAX

300L/min(nor)RESPONSE TIME
(98% RESPONSE)

550

MAX

500L/min(nor)FULL SCALEFLOW RATE OUTPUT SIGNALSETTING SIGNAL

050

5mL/min(nor)100

10mL/min(nor)

ACCURACY

20020mL/min(nor)

CONTROL ∆P(MPa)300

30mL/min(nor)MAX. GAS PRESS.(MPa)500

50mL/min(nor)101

100mL/min(nor)201

200mL/min(nor)301300mL/min(nor)501500mL/min(nor)102

1L/min(nor)202

2L/min(nor)302

3L/min(nor)502

5L/min(nor)103

10L/min(nor)

CONNECTION

153

15L/min(nor)MASS(kg)

203

20L/min(nor)303

30L/min(nor)503

50L/min(nor)703

70L/min(nor)803

80L/min(nor)104

100L/min(nor)154

150L/min(nor)204

200L/min(nor)254

250L/min(nor)304

300L/min(nor)404

400L/min(nor)504

500L/min(nor)

CONNECTION

P

Rc

N

NPTS

SW

R

VCR

O

CONNECTION SIZE

2GAS

GAS. TEMP
TEMP.DRIFT
TC-1100

PRESS.DRIFTPOWER SUPPLY+15 V DC 25mA Max.
–15 V DC 200mA Max.

GAS CONTACT MATERIAL

TC-1200

TC-1300

TC-1350

Rc1/4, OD1/4SW, VCR, VCO
1.1

1.4

DIMENSION
TC-1100

TC-1400

TC-1550

VCO

04

1/4"

TC-1100, 1200

06

3/8"

TC-1300, 1350

08

1/2"

TC-1400

123/4"

161"

TOKYO KEISO CO., LTD.

TC-1400, 1550TC-1200

TG-F2083-E03

TC THERMAL MASS FLOW CONTROLLER

TC-1300

TC-1350

TC-1400

TC-1550

20 to 80L/min(nor) 80 to 100L/min(nor) 100 to 150L/min(nor) 150 to 200L/min(nor) 200 to 300L/min(nor)

300 to 500L/min(nor)

2 to 100% OF FULL SCALE
WITHIN 4 sec.

WITHIN 3 sec.
0 to 5 V DC
0 to 5 V DC
±1%F.S.(at 25°C)
0.1 to 0.45

0.07 to 0.3

0.12 to 0.35

0.15 to 0.35

0.18 to 0.5

0.99
5 to 50°C
SPAN ±0.1%F.S./°C Max.
ZERO ±0.05%F.S./°C Max.
0.25%F.S. (WITHIN OPERATING PRESSURE RANGE)+15 V DC 25mA Max.
–15 V DC 320mA Max.

+15 V DC 25mA Max.
–15 V DC 200mA Max.

SUS316, SHOMAC*2 or SUS430*3, PTFE, FKM or CR
OD 3/8SW, VCR, VCO
2.0

3.2

Rc3/4, 1, OD 1/2, 3/4 SW

Rc 3/4, 1

6.0

6.2*(1) Flow rate with Nitrogen. Refer to MODEL CODE for details*(2) Ferrite Stainless Steel material*(3) TC-1300 and TC-1350 : SUS430, others : SHOMAC

TC-1300

TC-1350

TC-1400

TC-1550

TG-F2083-E03

TOKYO KEISO CO., LTD.

3

TC THERMAL MASS FLOW CONTROLLERTC-2000

HIGH PRESSURE THERMAL MASS FLOW CONTROLLER

MODEL CODE-FLOWRANGE

TC-2

STANDARD SPECIFICATIONS--MODELGASFLOW RANGE*(1)(FULL SCALE)

TC-2100

TC-2200

TC-2300

50mL/min(nor)to 10L/min(nor)

10 to 20
L/min(nor)

20 to 100
L/min(nor)

100

MAX

10L/min(nor)

200

MAX

20L/min(nor)FLOW CONTROL RANGE

2 to 100% OF FULL SCALE
WITHIN 3 sec. (98% RESPONSE)

100L/min(nor)RESPONSE TIME

500

50mL/min(nor)FLOW RATE OUTPUT SIGNAL

0 to 5 V DC

101

100mL/min(nor)201

SETTING INPUT SIGNAL

0 to 5 V DC200mL/min(nor)301300mL/min(nor)501500mL/min(nor)102

1L/min(nor)

MAX

300

FULL SCALE

202

2L/min(nor)302

3L/min(nor)502

5L/min(nor)103

10L/min(nor)153

15L/min(nor)203

20L/min(nor)303

30L/min(nor)503

50L/min(nor)703

70L/min(nor)803

80L/min(nor)104

100L/min(nor)

CONNECTION

P

Rc

N

NPTS
CONNECTION SIZE

ACCURACY
MAX. GAS PRESS.
(MPa)

TC-2100

50 to 80% of Primary pressure

GAS. TEMP.

5 to 50C

SPAN±0.1%F.S./°Cmax

ZERO±0.05%F.S./°Cmax

PRESS DRIFTPOWER SUPPLYGAS CONTACT
TC-2300

SW04

1/4"

TC-2100/TC-2200

06

3/8"

TC-2300

10MPa*(2)CONTROL ∆P

TEMP. DRIFT

TC-2200±1%F.S. (at 25°C)

CONNECTION

SIZE
TYPE

±0.1%F.S./(0.1MPa)max (on N2 gas) *(3)+15 V DC

25mA

–15 V DC

320mA

SUS316, SHOMAC ® *(4), PTFE, FKM or CR
OD 3/8

OD 1/4

Swagelok, Rc (=PT), NPT*(1) Flow rate with Nitrogen. In case of measurement of hydrogen (H2)Minimum flow range will be 250mL/min(nor).
*(2) Make the flow calibration by the actual pressure for theoperating pressure up to 9.8MPa. When exceeding 9.8MPa,
conduct the pressure test and flow calibration by the pressure
conversion, based on the operating pressure. There is the limit
in the maximum operating pressure, depending on gas.
(Reference: CO2 gas is available up to 3MPa. Otherwise itliquefies.)*(3) The pressure effect varies with the operating pressure and kindof fluid when the pressure exceeds 1 MPa.
*(4) Ferrite Stainless Steel material

DIMENSION
TC-2100

4TOKYO KEISO CO., LTD.

TC-2200

TC-2300

TG-F2083-E03

TC THERMAL MASS FLOW CONTROLLER

SUPPORTING INSTRUMENTS❏ EXCLUSIVE CABLES
Connection cables are available as follows.
End of cable model code: length in “meters” to be filled.
(Ex: SC-CM cable 2m → “SC-CM-02”)

TYPE OF CABLE

USAGE

STANDARD LENGTH

SC-CM- □□TC-1000/TC-2000↔TM-14002m(Max.100m)

SC-TC- □□TC-1000/TC-2000↔power supply(prepared by custmer)

2m(Max.100m)

TM-1400 CONVERTER UNIT
TM-1400 MINI CONVERTER UNIT is power supply and indication
unit which is used in combination with Tokyo Keiso’s TC-1000, 2000
series mass flow controllers.
All necessary functions of power supply to the mass flow controllers and scaling indication of flow signal, and flow rate setting function with the change of external/manual setting are provided in DIN
72mm compact housing.
As described above, it is now easy to configure the flow-rate regulating sysytem for various gases.
Panel cut and installation interval
25

72

5.5

147

12
More than 90

1ZERO
EXT2DIRECT

1009090
80 70

SETTOKYO KEISO

TG-F2083-E03

67 +0.7-0

More than 100

FLOW SET
FULL
30 20

REF
EXT150 40SCALE ZERO

6072

TM-1000 CONVERTER

67 +0.7-0TOKYO KEISO CO., LTD.

5TC THERMAL MASS FLOW CONTROLLERSYSTEM CONFIGURATIONWith TM-1400 converter unit

Using power supply prepared by customer

Exclusive cable (SC-CM-□ □)TM-1000 CONVERTER

Analog output
FLOW SETFULL

ZERO
EXT2DIRECT909030 20

10080 70

SET

EXT1

TC-1000/2000
MASS FLOW CONTROLLER

150 40REF

60

SCALE ZEROAC power supply

TOKYO KEISO

TM-1400
MINI CONVERTOR UNIT

TC-1000/2000
MASS FLOW CONTROLLER

Proportional mixing process

TM3000MINI CONVERTOR UNIT

6TOKYO KEISO CO., LTD.

TM-1400
MINI CONVERTOR UNIT

TG-F2083-E03

TC THERMAL MASS FLOW CONTROLLER

EXAMPLE OF MODEL SELECTION
The flow range is indicated on the basis of N2 gas.
When measuring the gases other than N2 gas, refer to the conversion factor (CF) shown below,
and check if the flow rate converted into the flow rate of N2 gas is acceptable for the desired model.
Formula for single ingredient gas (only one kind of gas)
Flow to select the model=(Converted to N 2 gas)

Max gas flow range
CF

Formula for mixed gas (more than 2 kinds of gas)
In case of the mixed gas, calculate CF of the mixed gas, and then make N2 conversion as well as single ingredient gas.
CF of the mixed gas=

1X1
X2X6++…+
CF1
CF2
CF6

X1 ：Composition ratio of 1 ingredient (VOL%/100)
X2 ：Composition ratio of 2 ingredient (VOL%/100)⋮
X6 ：Composition ratio of 6 ingredient (VOL%/100)
CF1 ：CF of 1 ingredient
CF2 ：CF of 2 ingredient⋮
CF of 6 ingredient
Flow to select the model=(Converted to N 2 gas)

Max gas flow range
CF of mixed gas

CF of main gases
MolecularCFformula
NitrogenN21.000
Air
Air
1.001
Argon
Ar1.2※aCarbon monoxide CO0.998
Carbon dioxide※b CO20.745
HeliumHe
1.404
HydrogenH21.007
NeonNe1.403
Ammonia
NH 30.769
Nitric monoxide
NO0.976

FluidMolecular
CFformulaNitrogen dioxide
NO20.740
Dinitrogen monoxide N 2O
0.714
OxygenO20.984
MethaneCH40.782
EthyleneC 2H40.623
EthaneC 2H 60.505
Propylene
C3H 60.407
PropaneC3H 80.351
n-butanen-C 4H10 0.266

Fluid※a : N 2 conversion of Ar is 1.2, but it is 1.4 when correcting the gas based on CF.
※b : Service limit for CO2 is 3MPa (TC-2000 Series). When the pressure reaches the limit,
keep the gas temperature at 30ºC or higher.
Example: Fluid; Helium, Flow: 25L/min(nor), Pressure: 0.1MPa, Temperature: 20℃, Fitting:1/4"SWL:-

Converted flow to N 2 gas=

25L/min（nor）
1.404（CF）=

17.8

The converted flow to N 2 gas is 17.8, and the model to be selected is TC-1200-203-S04.

CAUTION ON USE・ Install the unit horizontally with its connector facing upwards.
・ The primary pressure should be the same as the operating pressure as specified in the inquiry.
・ Install the unit so that the arrow on the unit matches the flow direction of fluid.

TG-F2083-E03

TOKYO KEISO CO., LTD.

7

TC THERMAL MASS FLOW CONTROLLER

ORDERING INFORMATION
Specify the following for order/inquiry❏ THERMAL MASS FLOW CONTROLLER

TC- □□□□-□□□-□□□TYPE
GAS TO BE MEASUREDMAX.

PRIMARY PRESS.

MPa

Nor.

MPa

DIFFERENTIAL PRESS.

toTEMP.

°C

Min.

MPa

FULL SCALE□ mL/min(nor)

CONNECTION SIZE

□ 1/4"

CONNECTION TYPE

□ Swagelok□ 3/8"□ 1/2"□ Rc (=PT)

MPa

□ NPT

□ L/min(nor)□ 3/4"

□ 1"

□ VCR

□ VCO

❏ SUPPORTING INSTUMENTS□ TM-14 □ 0 - □ □ (Indication+Setting)

CONVERTER
EXCLUSIVE CABLE□ Not required

SC-CM- □ □□ STD. 2m□m (Max.100m)

SC-T C- □ □□ STD. 2m□m (Max.100m)* Specification is subject to change without notice.

Head Office : Shiba Toho Building, 1 – 7 – 24 Shibakoen, Minato-ku, Tokyo 105 – 8558
Tel : +81-3 – 3431 – 1625 (KEY) ; Fax : +81-3 – 3433 – 4922
e-mail : overseas.sales@tokyokeiso.co.jp ; URL : https://www.tokyokeiso.co.jp
8TOKYO KEISO CO., LTD.

TG-F2083-E03