Suitable for flow measurement and control
of cleaning and CMP processes
ULTRA-CLEAN ULTRASONIC FLOWMETER

SFC017 Lead free Compatible
UCUF Converter for ultrasonic flowmeter

OUTLINEThe UCUF (Ultra-Clean Ultrasonic Flowmeter) series UltrasonicFlowmeter is designed for very low flow rate applications.
The nonwetted Sensor design, constructed of specific grade PFA
material, makes the UCUF Series an ideal choice for semiconductor
industry, where extreme cleanness of pipe line inside is of primary
importance.
The SFC017 is used as a converter for UCUF series ultrasonicflowmeters.
Using state-of-art signal processing technology, this converter offers
stable flow measurement by minimizing adverse effects caused by
the bubbles contained in the flow liquids. Thus, it has achieved thereliable flow measurement of semiconductor manufacturing process
and chemical liquids handling process.
Furthermore, the stability of flow measurement at low flow rate has
been improved significantly by the upgrading of time resolution andhigh speed signal processing compared to the existing products.

❏ Coaxial connector
General purpose BNC coaxial connector common to existing

FEATURESproducts❏ New signal processing has improved anti- bubbles capability of❏ Cleared EMC test conforming to EN61326-1 :2006

converter.

❏ Lead free compatible

Normally, ultrasonic flowmeter has difficulty in measuring fluid❏ Optimal measurement because of zero adjustment before suringcontaining bubbles, because the bubbles interfere with ultrasonic❏ Measurement of high kinetic viscosity liquids as high as 40mm2/s
Ideal detector with clean construction

signal passage.
In virtue of DSP and accumulated field experience, anti-bubbles❏ Corrosion resistant and easy installation

capability has been remarkably improved.

❏ Accuracy : within ±1% of the reading at flow velocity 1m/s or❏ Compact and light weight

moreThe detector and the converter are of separate type. Compact❏ Versatile functions including followingsand easy wiring because of the plug-in construction of the con-

Alarm outputs of instantaneous flow rate or fault status output

verter.

Various analog outputs of instantaneous flow rate are selectable

STANDARD SPECIFICATIONS
ModelPower supply
Consumption current
Inrush current Approx.

Pulse output

OutputAlarm output
Current output
InputSensor signal

Communication function

SFC-900
DC24V±10%
Approx. 110mA (Approx. 2.7W)
1.0A/2ms
Either frequency pulse output or fault output is selectable• Frequency pulse output
Open collector pulse
Load rating: Within DC30V, 15mA
Pulse width: Duty 1:1
Pulse rate: 0 to 1000Hz (Full scale)• FAULT output (Output will be made if abnormalities occur in converter or detector.)
Open collector pulse
Load rating: Within DC30V, 15mA
High or Low alarm (2 points)
Open collector pulse
Load rating: Within DC30V, 15mA
DC4 to 20mA
Load resistance: Within 500Ω
Exclusive cable (BNC connector)
RS485 communication function
Protocol: MODBUS
Maximum 32 of flowmeters can be connected.

TG-F1084-0E

SEP. 2013K

SFC017 UCUF Converter for ultrasonic flowmeter• Measurable fluid: Liquids• Fluid temperature: 10 to 60°C

• Fluid sound speed: 1000 to 2200m/s(Consult us about 61°C or more.)—SFC017

Analog output• Fluid kinematic viscosity : 0.3 to 40mm2/s• Flow detector and Flow rangeDetector
UCUF-04MB
UCUF-04K
UCUF-06K

Flow range (L/min)
Min.
Max.
0 to 0.05
0 to 2.0
0 to 0.05
0 to 3.0
0 to 0.4
0 to 8.0* Coaxial connector is BNC connector.
* Consult us about other models.
• Low flow cutoff: 0 to 25%F.S.

• Linearizer: Automatic
Manual/20 line-segment approximation (Option)• Status: FAULT, AGC/ZERO, ALARM• Address switch: 1 to 32 (Selectable)• Ambient condition: Temperature 0 to 60°C when in-(Red LED display)stalled alone
0 to 50°C when installed at 5 mminterval• Humidity: 30 to 80% RH• Installation: DIN rail installation□□10111213□(Blank)/ZSpecial

Description
4 to 20mA
0 to 10V (Option)
0 to 5V (Option)
1 to 5V (Option)
Not provided
Provided

BNC connector
Terminal
IN
OUT

Polarity
Inlet
OutletDescription
Sensor signal input

Terminal arrangement
Terminal No
123456789101112

Terminal specification/Terminal name
AL2
AL1
COMFG
0V
+24V
RS485(+)
P.OUT(+)
A.OUT(+)
RS485(–)
P.OUT(–)
A.OUT(–)

Description
Alarm output 2
Alarm output 1
Common (For AL1, AL2)
GroundingPower supply input
DC24V
RS485 communication (+)
Pulse output (+)
Current output (+)
RS485 communication (–)
Pulse output (–)
Current output (–)• Enclosure classification : IP20 (Indoor use)
• Materials: ABS resin (Black)• Mass: Approx. 180g

DIMENSIONS (DIN rail installation type)
Terminal arrangement

DIN rail mount (Rear view)* Specification is subject to change without notice.

Head Office : Shiba Toho Building, 1 – 7 – 24 Shibakoen, Minato-ku, Tokyo 105 – 8558
Tel : +81-3 – 3431 – 1625 (KEY) ; Fax : +81-3 – 3433 – 4922
e-mail : overseas.sales@tokyokeiso.co.jp ; URL : http://www.tokyokeiso.co.jp
2TG-F1084-0E