Ideal for ﬂow measurement and control of cleaning andCMP processes
ULTRA-CLEAN, ULTRASONIC FLOWMETER

SFC2000

RoHS Compatible

Converter for UCUF ultrasonic ﬂowmeter

OUTLINEThe UCUF series ultrasonic ﬂowmeter is designed for measuring
small flow rates of ultrapure water and chemical liquids. All
wet parts are made of special grade PFA molds and have nomoving parts or sealing mechanism such as an O-ring which
would accumulate liquid components. The simple and smooth
construction leaves no residues and is ideal for processes such as
semiconductor manufacturing which requires ultimate cleanliness.
T he S FC20 0 0 is a co nver ter for U CU F series ultraso nicflowmeters. Equipped with a next-generation upgraded chip, thisproduct improves the resolution of measuring the propagation
time of ultrasound waves and the stability, and also significantly
reduces the power consumption (at least 50 % less than ourconventional models).
The housing is redesigned to be more compact (50 % smaller
than conventional models) to save installation space. Up to eight
units can be connected by using commercial TBUS connectors.

FEATURES● Next-generation upgraded chip
The chip enables the SFC2000 to measure propagation time
at high speed (output resolution: 45 ps). This reduces the CPUl o a d a n d p o w e r c o n s u m pti o n , t h u s c u r b i n g a ris e i ntemperature and ensuring stability.
● Compact
Separated from the detector, the converter is compact andlightweight.
50 % smaller than conventional models
The DIN rail bus connector reduces wiring to the power supplyand RS485 connector.
The SMB connector also makes the body smaller.

STANDARD SPECIFICATIONS
ModelPower supply

Inrush current
Pulseoutput
Output● Corrosion resistant and easy to install● Accuracy: Within ±1 % of the reading at ﬂow velocity of 1 m/s
or more1 A or lower• Frequency pulse output
Open collector
Load rating: Within 30 V DC, 10 mA
Duty ratio: 1:1
Pulse rate: 0 to 1000 Hz (full scale)
4 to 20 mA DC
Load resistance:
Within 500 Ω‒

Exclusive cable (SMB connector)

Communication
function

RS485 communication function
Protocol: MODBUS
Up to 32 units can be connected• Measuring ﬂuid: Liquids• Fluid temperature: 5 to 90 ℃
• Fluid sound speed: 400 to 2500 m/s• Fluid kinematic viscosity : 0.3 to 40 mm2/s• Flowmeter and ﬂow range
Flowmeter● Stronger resistance to bubbles
It is diﬃcult for conventional ultrasonic ﬂowmeters to measure
fluids containing bubbles because the bubbles disturb thepropagation of ultrasound waves. A new technology formeasuring propagation time based on our accumulatedﬁeld experience has eliminated the abnormal output caused bybubbles.

24 V DC ± 10 %Sensor
signalInput● New function: Error history saving function● Simple parameter setting

24 V DC ± 10 %Currentoutput● RoHS compatible● Detector with highly clean construction

SFC2000-A

Approx. 65 mA
Approx. 40 mA
Consumption current (Approx. 150 mA at (Approx. 150 mA atstart up)start up)

● Cleared EMC test: EN61326-1: 2006

● Liquids with kinematic viscosity of as high as 40 mm2/s canbe measured.

SFC2000-0

Flow range (L/min)
Min.

Max.

UCUF-04M

0 to 0.05

0 to 2.0

UCUF-04HM

0 to 0.05

0 to 3.0

UCUF-06M

0 to 0.4

0 to 8.0

UCUF-10M

0 to 1.0

0 to 20.0

UCUF-15M

0 to 3.0

0 to 50.0

UCUF-20M

0 to 4.0

0 to 80.0* SMB coaxial connectors are used.
* Consult us about other models.

TG-F1096-4E
RevisedMay 2016 K
1st edition Nov 2012 K

SFC2000CONVERTER FOR UCUF ULTRASONIC FLOWMETERFRONT• Low ﬂow cutoﬀ：0 to 25 %F.S.

• Linearizer：Automatic compensation with kinematic
viscosity setting
Manual /10 line-segment approximation(Option)• Status indication：ERROR, ZERO/AGC (by red LEDs)
SET (by blue LED)

• Address switch

A line for indicating themodel with analog
output

（1）
（2）

②（3）

③（4）

①

• Ambient temperature ：0 to 60 ℃ when installed alone
0 to 50 ℃ when installed at 5-mm
intervals
0 to 40 ℃ when installed in contact
See the instruction manual for details of
linked installation.
• Humidity：30 to 95% RH without condensation• Installation：DIN rail installation• Connection capacity ：Up to 8 units can be linked together.
The number of units can be increased
with an inrush current control power
supply (as long as it does not exceed
the 8A current rating of the busconnector). Please consult us.
• Enclosure
classiﬁcation：IP30 (Indoor use)

• Material：PA66 (Gray)• Mass：Approx. 70 g (without analog output)

1248
16

⑤
⑥485
ADR

⑦No

Name

Description

Zero - p oint a djustment Push this button to adjust the1switchzero point.

Connectors (4 terminals)
2

for pulse output andanalog output

Approx. 75 g (with analog output)④ZEROADJ. ERR
ZERO
SET

：1 to 32 (Selectable)

Terminals for pulse and analogoutput
Lights up in case of an3

ERROR lamp (Red)abnormal state when receivingsignals.

MODEL CODE
SFC2

□

00-□

Lights up when an AGC error

Description

0UCUF-04, 06

1UCUF-10, 15, 20
0Without analog output

A

With analog output (DC 4 to 20 mA)

G

With analog output (DC 0 to 20 mA)

H

With analog output (1 to 5 V DC)

N

With analog output (0 to 5 V DC)

PWith analog output (0 to 10 V DC)

4

AGC/ZERO lamp (Red)occurs.
Blinks when adjusting the zero
point.
Lights up or blinks when setting

5SET lamp (Blue)

6RS485 address switches For setting slave addresses

7

SMB connectors

parameters for communication.
For connecting sensor cables

SMB connector
TerminalColor

Polarity

INRed

InletOUT

Black

OutletDescription
Sensor signal input

Terminal arrangement of pulse output and analog output
Without analog output (SFC2000-0)
Te rmin alNo.

Terminal name

Description

1P.OUT ( ＋ )Pulse output ( ＋ )2

P.OUT ( − )Pulse output ( − )3NCNo connection

4

NC

No connection

With analog output (SFC2000-A, etc.)
Te r min alNo.

2TOKYO KEISO CO., LTD.

Terminal name

Description

1P.OUT ( ＋ )2P.OUT ( − )Pulse output ( ＋ )Pulse output ( − )3

A.OUT ( ＋ )Analog output ( ＋ )4A.OUT ( − )Analog output ( − )TG-F1096-4E

SFC2000CONVERTER FOR UCUF ULTRASONIC FLOWMETERDIMENSIONS

97

MAX 110

17.5

6934※
71 to 76 slides* 39 mm when the bus connector 2 isconnected for SFC2000-A, etc.

35 mm DIN rail (JISC2812)

Terminal arrangement of bus connector
Terminal
（1）
（2）
（3）
（4）
（5）

No.

Speciﬁcation/name

Description

1

DC POWER (0 V)

24 V DC power supply（− )2DC POWER (24 V)

24 V DC power supply（＋）

3RS485 SG

RS485 signal ground

4RS485（＋）

RS485 communication（＋）

5RS485（− )RS485 communication（− )Bus connector (5 terminals)

TG-F1096-4E

TOKYO KEISO CO., LTD.

3

SFC2000CONVERTER FOR UCUF ULTRASONIC FLOWMETER
Bus connector 2

Bus connector 1
17.5

2222.522

DIN RAILDIN RAIL

Connected with bus connector 1

Connected with bus connector 2

WIRING CONNECTOR (FEMALE)
17.5

17.5

WIRING CONNECTOR (FEMALE)

17.5

17.5

17.5

17.5

WIRING CONNECTOR(MALE)

ZERO
ADJ.

124816ERRZERO
SET485ADRZERO
ADJ.

124816ERR
ZERO
SET

485
ADR

ZERO
ADJ.

124816WIRING CONNECTOR(MALE)

ZERO
ADJ.

ERR
ZERO
SET

124816485
ADR

ZERO
ADJ.

ERR
ZERO
SET

124816485
ADR

ERR
ZERO
SET

485
ADR

ZERO
ADJ.

124816

ERR
ZERO
SET

485
ADR

DIN RAILDIN RAIL

17.9

9.5

517.9

514.5

Connectors
Order No. ofTypeSpeciﬁcation

Model

PHOENIXCONTACT

5 terminals with 3.81

Bus connector 1mm pitch, gray (17.5(for SFC2000-0)mm width)

Bus connector 25 terminals with 3.81

(for SFC2000-mm pitch, gray (22.5A, G, H, N, P)

mm width)cable

ME 17.5 TBUS 1.5/5-ST-3.81 KMGY

2713645―

ME 22.5 TBUS 1.5/5-ST-3.81 KMGY

2713722―

IMC 1.5/5-ST-3.81

1857919

AWG # 28-16

MC 1.5/5-ST-3.81

1803604

AWG # 28-16

MC 1.5/4-ST-3.81

1803594

AWG # 28-16

5 terminals with 3.81

Bus connector formm pitch, green

wiring (female)(socket)Bus connector for

5 terminals with 3.81

wiring (male)mm pitch, green (plug)

Wiring connector forpulse output / analog
outputApplicable4 terminals with 3.81mm pitch, green (plug)

Remarks

For connecting a converter(17.5 mm width)
For connecting a converter(22.5 mm width)
For wiring 24 V DC power supply,
RS485, terminator
For wiring 24 V DC power supply,
RS485, terminator
Substrate-side connector
MC 1.5/4-G-3.81 P26 THRR32* Specification is subject to change without notice.

Head Office : Shiba Toho Building, 1 – 7 – 24 Shibakoen, Minato-ku, Tokyo 105 – 8558
Tel : +81-3 – 3431 – 1625 (KEY) ; Fax : +81-3 – 3433 – 4922
e-mail : overseas.sales@tokyokeiso.co.jp ; URL : http://www.tokyokeiso.co.jp
4

TOKYO KEISO CO., LTD.

TG-F1096-4E