Measurement and control of cleaning and CMP processes

SFC3000 RoHS Compatible
Converter for ultra-clean, ultrasonicﬂowmeters UCUF for liquid, small sizes

OUTLINEThe UCUF series ultrasonic flowmeter is designed formeasuring small flow rates of ultra-pure water and chemicalliquids. All wet parts are made of special grade PFA molds
and have no moving parts or sealing mechanism such as an
O-ring which would accumulate liquid components. The simple
and smooth construction leaves no residues and is idealfor processes such as semiconductor manufacturing whichrequires ultimate cleanliness.
The SFC3000 is a converter for UCUF series ultrasonicﬂowmeters. Using state-of-the-art technologies such as Digital
Signal Processing, the converter has reduced significantly
the adverse effects caused by the bubbles contained insemiconductor and chemical liquid handling processes.

FEATURES❑ Enhanced resistance to bubbles
The conventional ultrasonic flowmeters used to havedifficulties in measuring fluids containing bubbles because
the bubbles disturb the propagation of ultrasound waves.
By checking the received ultrasound waves and evaluatingthe effects of bubbles, the DSP technology and ouraccumulated ﬁeld experiences have eliminated the abnormal
output caused by bubbles. Thus the SFC3000 has improved
significantly the resistance to bubbles by reviewing thesignal processing method of the ultrasonic waves comparedwith the conventional models.
❑ Compact design
Separated from the detector, the converter is compact andlightweight with a plug-in construction easy for wiring.

❑ Cleared EMC test: EN61326-1: 2013
EN61326-2-3: 2013
❑ RoHS compatible❑ Liquids with kinematic viscosity of as high as 40 mm2/scan be measured❑ Detector with highly clean construction❑ Corrosion resistant and easy to install❑ Accuracy: Within ±1% of the reading at ﬂow velocity of1 m/s or more
❑ Additional functions• Error detection• Self diagnosis❑ Simple parameter setting suitable for each measuring liquid

STANDARD SPECIFICATIONS
ModelPower supply
Consumption current
Inrush current

Pulse
OutputAlarm
Current
Input

From detector

Communication

SFC3000
24 VDC±10%
Approx. 100 mA (Approx. 200 mA at start up)
Approx. 1.5 A/2 ms
Selectable from frequency pulse, totalizing pulse or fault output
By open collector:
Load rating: Within 30 VDC, 15 mA• Frequency pulse output
Duty ratio: 1:1
Pulse rate
: 0 to 1000 Hz (full scale)• Totalizing pulse output
Unit: x0.1 mL, x1 mL, x10 mL, x1L
Pulse width: 0.5 ms, 50 ms, 100 ms• Fault output when converter or detector is in error. NO or NC is selectable
Flow rate high and low alarms (2 points), or Totalized ﬂow alarms (2 points)
By open collector:
Load rating: Within 30 VDC, 15 mA
4 to 20 mADC
Load resistance : Within 500 ΩExclusive cable with a BNC connector
RS485 installed
Protocol : MODBUS
Up to 32 units connectable

TG-F1133-1E
RevisedMay 2016 K
1st edition Sep 2015 K

SFC3000 Converter for ultrasonic ﬂowmeters UCUF for liquid, small sizes

・Measuring liquids : Liquids
・Fluid temperature : 5 to 90°C
・Fluid sound speed : 400 to 2500 m/s
・Fluid kinematic viscosity : 0.3 to 40 mm2/s
・FIowmeter and ﬂow range
Flow range（L/min）
Min.
Max.
0 to 0.1
0 to 3.0
0 to 0.05
0 to 3.00 to 0.4
0 to 8.0
0 to 0.05
0 to 3.0
0 to 0.4
0 to 8.0
0 to 0.05
0 to 2.0
0 to 0.4
0 to 8.0
0 to 1.0
0 to 20.0
0 to 3.0
0 to 50.0
0 to 4.0
0 to 80.0
0 to 1.0
0 to 20.0
0 to 3.0
0 to 50.0
0 to 4.0
0 to 80.0

Model
UCUF-04BL
UCUF-04K
UCUF-06K
UCUF04E
UCUF06E
UCUF-04M
UCUF-06M
UCUF-10K
UCUF-15K
UCUF-20K
UCUF-10M
UCUF-15M
UCUF-20M

・Installation
・Enclosure
・Material, color
・Mass
Connectable
tube size
3/8
3/8
3/83/83/8
1/4
3/8
1/2
3/4
1
1/2
3/41

※BNC coaxial connectors are used.
※Consult us about other models.
・Low ﬂow cutoﬀ: 0 to 25 %F.S.
・Linearizer: Automatic compensation withkinematic viscosity setting
Manual, max. 20 line-segment
approximation (Option)・Status indication: ERROR, ZERO/AGC, ALM, in red
LEDs・Address switch: 1 to 32 (Selectable)
・Ambient temperature : 0 to 60°C when installed alone
0 to 50°C when installed at 5 mmintervals
0 to 40°C when installed in contact
・Humidity: 30 to 95%RH without condensation: DIN rail installation: IP20 Indoor use: ABS resin, black in color: Approx. 110 g

Model code
SFC3 □ 00- □Description

0For detectors other than mentioned below

1

UCUF-10K, 15K, 20K
0 Analog output 4 to 20 mA DC
1 Analog output 0 to 10 V
2 Analog output 0 to 5 V
3 Analog output 1 to 5 V

BNC connector
Terminal
IN
OUT

Color
RedBlack

Polarity
Inlet
OutletDescription
Detector signal input

Terminal arrangement
Terminal No. Terminal name
1AL22AL13COM
4FG
50V
6+24V
7RS485 （+）
8P.OUT （+）
9A.OUT （+）
10RS485 （‒）
11P.OUT （‒）
12A.OUT （‒）

Description
Alarm output 2
Alarm output 1
Common to AL1 and AL2Grounding
Power supply
24 VDCRS485 communication（+）
Pulse output（+）
Current output（+）
RS485 communication（‒）
Pulse output（‒）
Current output（‒）

DIMENSIONS OF DIN RAIL MOUNTING TYPE
OUT

Terminal arrangement2426 +0−0.2

IN23（11.5）

87.5（MAX.90）
74

Housing

Mounting on DIN rail

100

Lock arm

30

DIN rail

35.4
94

Stopper+026 −0.2

DIN terminal block* Specification is subject to change without notice.

Head Office : Shiba Toho Building, 1 – 7 – 24 Shibakoen, Minato-ku, Tokyo 105 – 8558
Tel : +81-3 – 3431 – 1625 (KEY) ; Fax : +81-3 – 3433 – 4922
e-mail : overseas.sales@tokyokeiso.co.jp ; URL : http://www.tokyokeiso.co.jp
2TG-F1133-1E