Plant and Ofﬁce Initiatives for the Environment
Preventing Global Climate Change

Figure 2: Electricity consumption(Million kWh)Our approach to climate change
At the TEL Group, each plant and office makes efforts toachieve its own goal of energy consumption reduction set inunits (e.g., floor area) that it has chosen to measure and reports
energy consumption depending on the form of its business. The
Group is also proactively adopting photovoltaic power generation
systems to reduce CO 2 emissions.

Efforts to reduce energy consumption

270.1

300

249.6

9.912.5

231.8
16.0

262.1

250.6

251.4

20.5

27.8

40.5

223.6

221.6

2012

2013

200

260.2

237.1

100

215.8

230.1

0
2008

2009

Japan

Overseas

2010

2011

(FY)

Figure 3: Breakdown of CO 2 emissions from energy
consumption 2 by source*In accordance with the Act on the Rational Use of Energy, theGroup plants and offices have set the goal of reducing energy
consumption by at least 1% year on year. In fiscal 2013, fiveout of six TEL plants in Japan achieved this goal. Energy
consumption with the unit of kiloliter of crude oil equivalent*1
decreased by 6.4% from the previous year (Figure 1).

1%City gas

3%

LPG

Kerosene1%

Heavy oil, light oil, etc. 1%

FY2013

Electricity 94%

140,712tons

Figure 1: Energy consumption in FY2013(Baseline year = FY2012)
EnergyEnergy consumption 1FSVOJUDPOTVNQUJPO
consumption (kl) over baseline year
over baseline year
Tohoku Plant
3,400
102%
89%
Technology Center Sendai
2,754
103%
104%
Yamanashi Plant (Hosaka)
11,64589%
89%
Yamanashi Plant (Fujii)
9,511
95%
95%
Koshi Plant
15,90596%
96%
Ozu Plant
3,47882%82%Total
46,693
93.6%
Plant

Power consumption of the entire TEL Group increased
by about 4% from fiscal 2012 (Figure 2). CO 2 emissions
associated with energy use increased by about 38% fromfiscal 2012, primarily due to worsening power emission factors
in Japan (Figures 3 and 4). If power emission factors are
assumed to be at the same levels as those in fiscal 2012,
CO 2 emissions at plants that have set their targets decreased
similarly as with energy consumption (Figure 5).

Figure 4: CO 2 emissions from energy consumption(t)

140,712150,000
120,000

113,169 116,078
8,336

7,335

23,316

90,616
8,945

12,046

15,06381,671

84,847

87,124

2010

2011

2012

90,00060,000117,396

107,742

105,834

30,00002008
Japan

2009

In fiscal 2013, the Koshi Plant introduced photovoltaic power
generation systems. The TEL Group generated a combined totalof 3,858 MWh using PV cells installed at the Koshi Plant as wellas the Yamanashi and Miyagi Plants, which had already adopted
PV systems, in fiscal 2013 (Figure 6).

Glossary2013(FY)

Overseas

CO 2 emissions in ﬁscal 2012 totaled 87,124 tons minus a 50,000 ton reduction
brought about through the use of a domestic clean development mechanism (CDM)*3.

Figure 5: CO 2 emissions inareas that have set goals(Thousand tons)

Introducing PV power generation systems

96,893 102,187

100

Figure 6: Electricity generated with
17QPXFSHFOFSBUJPOTZTUFNT(Million kWh)

74

3.9

4.0

93
69

2.2
50

2.000
2013
2013* (FY)2012
*When power factors are the same as those in ﬁscal 201220122013 (FY)of crude oil equivalent: Volume of electricity, heavy oil, gas and other types of energy used × Per-unit calorific value of each energy type ×*1 Kiloliter
Conversion rate for crude oil equivalentemissions from energy consumption: We used adjusted emission factors for individual electric power providers for the emission factor for electricity*2 CO
consumption in Japan in fiscal 2013. For the emission factor for electricity consumption overseas, we used estimated factors calculated by the Federation of2Electric Power Companies of Japan based on values published by the International Energy Agency (IEA).
Domestic clean development mechanism (CDM): The approved mechanism for CO emissions reduction under Japan’s Domestic CDM System (a Japanese*3 government
scheme that allows small and medium-sized businesses to receive funding, technology, and technical support from large businesses in order to2work collaboratively to reduce CO 2 emissions and trade the reduced amount as emission credits)28

Conserving Resources

Efforts to reduce the use of paper

Our approach to resource conservation
The TEL Group is working to minimize the use of limited natural
resources by reducing the volume of water and paper used.

Our employees are encouraged to use duplex copying, to copy
at a reduced size, and to digitize information and internal
circulars. As a result of these efforts, the TEL Group’s use ofcopier paper in Japan in fiscal 2013 decreased by about 25%,or more than 8 million sheets, compared with fiscal 2012.

Efforts to reduce water consumption
The TEL Group has set a new environmental goal of keeping
water consumption at the same or at a lower level than the basic
unit set by each plant in fiscal 2012. In fiscal 2013, five out of
the six goals set regarding water (tap water, industrial water andgroundwater) used at six TEL plants in Japan were achieved.
The Hosaka Plant, for example, streamlined facilities forpure water, which accounts for a majority of water used, andconsequently reduced overall water consumption by about 5%
from fiscal 2012 levels. At the same time, the Ozu Plant carriedout activities to reduce water consumption at its cafeteria,
including ensuring intermittent operation of faucets and using
rinse-free rice, which resulted in a 67% reduction in water
consumption compared to the level before implementing theseries of measures. While sharing these practices throughout thegroup, each plant is making efforts to reduce water consumption.

8BUFSDPOTVNQUJPOJO':

(Baseline year = FY2012)

8BUFSUZQF
8BUFS
8BUFSDPOTVNQUJPO 1FSVOJUDPOTVNQUJPO
used consumption (m3) over baseline year over baseline yearPlant
Tohoku Plant

56,965

121.5%

88.8%

50,246116.6%

110.3%

Technology Center Sendai
7,501

73.0%

69.1%

Yamanashi Plant (Hosaka)

243,377

95.2%

95.2%

Yamanashi Plant (Fujii)

60,029

93.3%

93.3%

527,89989.4%

89.2%946,017

93.6%

Koshi Plant
Ozu Plant
Total
Tap waterIndustrial water

Groundwater

8BUFSDPOTVNQUJPO(Thousand m 3)

1,200

1,180
48

1,139
65

2

1967
49

Streamlining pure water facilities at the Hosaka Plant

599

800

104

315

300

531

506

466

296

301

312

2011

2012

2013 (FY)Tap waterIndustrial water

64
1

199

504

No.1
RO*5No.2
RO

400

Pure water

531

Discharged
waterAnion tower*4

Discharged
water

Pretreatment withmembrane ﬁlter

02008

After improvement

498

2009

Overseas use

Cation tower*6+ Anion tower

We reduced the amount of water discharged by reviewing
pretreatment and interim treatment methods and integrating
two RO treatment units into one. We were also able to reduce
the amount of liquid chemicals used for treatment and theelectricity used for pumps of related facilities.

RO2010Groundwater

Pure water

Discharged
water

Activatedcarbon ﬁlter

413

ENVIRONMENT

Tap water

1,182

70575

Before improvement
Tap water

1,192

1,090

TOPICS
Score of semiconductor production equipment manufacturers

Achieving a 79 CDP*7 2012 disclosure score
Tokyo Electron scored 79 for its CDP disclosure score, which
evaluates strategy on climate change, initiatives to reducegreenhouse gas emissions and status of information disclosure.
We will continue to make proactive efforts for environment
conservation and information disclosure.

Glossary(Disclosure score)

100

7986
7061

550Tokyo ElectronJapanese sector
peer company AJapanese sector
peer company BJapanese sector
peer company C

Overseas sector
peer company

tower: A tower where anion treatment is conducted*45 Anion
RO: Reverse osmosis operation*6 Cation tower: A tower where cation treatment is conducted*7 CDP: Carbon Disclosure Project. A project that works with institutional investors to ask leading companies by market value in key countries to disclose their* strategies for combating climate change and greenhouse gas emissions. Since its start in 2000, the response rate from corporations has been increasing
year by year.
29Reducing Waste
Our approach to waste reduction
In its efforts to minimize waste, the TEL Group recycles whatever
waste is generated to the greatest extent possible, and disposesof non-recyclable waste in a proper and responsible manner.
To be more specific, we separate recyclable waste from
non-recyclables, use new manufacturing processes that do not
involve waste generation, hire only waste disposal companies
inspected and authorized by our company, periodically check
final waste disposal practices, and also focus on educational
activities related to the sorting of waste and other topics. Somebusiness sites have begun using electronic manifests*1 toensure proper management of waste.

Breakdown of waste (Japan)
Others12%

Wood waste/packaging materials

6%

Plastics

8%

Paper

8%

Metal/product waste

14%

FY2013Liquid waste 52%

7,960
tons

Recycling rate and generation of incinerated and landfill waste (Japan)
(%)

(t)

500

97.0

97.3

97.3

98.1

97.4

97.3

100

Target: Maintain recycling rate of 97% or more

400366331

Volume of waste generated andrecycling rates
The volume of waste generated at TEL plants and offices inJapan decreased by 38% from fiscal 2012, as the liquid waste
treatment building at Koshi Plant began its operations, resulting
in a decrease in the volume of liquid waste to be treated by anoutside contractor. With a recycling rate*2 of 97.3% in fiscal
2013, the TEL Group achieved its goal of maintaining a recyclingrate of 97% or more. Also in fiscal 2013, the Group monitored
the volume of waste generated at its plants and offices outside
Japan, and confirmed a recycling rate of about 20%. We will
monitor the volume of waste generated at overseas locations ina more accurate manner for even higher goal setting.

Zero waste
The TEL Group defines plants where less than 2% of waste
generated is incinerated or put into landfill as “zero wasteplants.” In fiscal 2013, we achieved zero waste at six plants inJapan as a result of our efforts to reduce waste and recycle.

288300276245215

200
10002008

2009

Incineration and landﬁll

2010

2011

2012

2013 (FY)

0Recycling rate3 FDZDMJOHSBUFGPSJOEVTUSJBMXBTUFHFOFSBUFEBU5&-(SPVQplants in Japan
Recycling rate
Plant
FY2012FY2013

Tohoku Plant

99.2%

100%

Taiwa Plant

100%100%

Yamanashi Plant (Hosaka)

100%100%

Yamanashi Plant (Fujii)

100%100%

Koshi Plant

100%100%

Ozu Plant

100%

100%

TOPICS
Overseas initiative
Tokyo Electron Taiwan Limited (TET) has worked on waste sorting,i.e., separating recyclable waste from general waste. By installing
trash bins labeled by the type of waste at the entrance of the officeand the clean room to ensure proper waste sorting, TET achieved arecycling rate of 63% in fiscal 2013. TET will continue to work on
reducing and sorting waste to improve their recycling rate.

Glossary

manifest: A system in which the flow of industrial waste is managed via a communication network linking information processing centers, the*1 Electronic
companies generating the waste, waste collection and transportation companies, and waste disposal companies. It replaces the conventional paper-based
control manifest.

30

Trash bins labeled for waste separation installedat the entrance of the kitchen and clean room

*2 Recycling rate: Recycled amount ÷ Amount of waste generated × 100

after use either through specialist
waste disposal contractors or using ourin-house processing equipment. We willcontinue to properly manage risk relating
to these chemical substances.
Illustrating one example of proper
Shelves used to store
chemical substances at TEK
chemical substance management,
Tokyo Electron Korea Limited (TEK) specifies where to store thechemical substances it handles, keeps (M)SDS information at
the storage site, and places GHS-required labels on containers
used for carrying chemical substances.

Management of Chemical Substances
Our approach to the management ofchemical substances
The TEL Group uses chemical substances mainly in thedevelopment and manufacturing phases of products. In thedevelopment phase, whenever we introduce a new chemical
substance or alter the method of using a chemical substance,
we make sure to check for environmental, health and safety
risks and take the necessary measures before the new
substance or method is adopted.

7PMVNFPG1353$MBTT*%FTJHOBUFE$IFNJDBM4VCTUBODFTIBOEMFE +BQBO

Compliance with the PRTR* law3(kg)13,70914,361

12,450

169

1,617

2,108

5,071

15,000In accordance with the Act on Confirmation, etc. of Release
Amounts of Specific Chemical Substances in the Environment
and Promotion of Improvements to the Management Thereof(“Japanese PRTR law”), we ensure that chemical substances
regulated under the law are managed rigorously, and thatthe amounts of regulated substances used, discharged andtransferred are consistently monitored. The TEL Group useshydrogen fluoride, one of the regulated substances, in large
quantities particularly during the cleaning of test wafers. We
make sure to properly dispose of the hazardous substances

10,000

9,693

1,359
3,962

1,607

236

1,459
1,200

6,285

5,000

0847
1,225

5,021

5,427

3,977

2008

2009

2010

Hydrogen ﬂuoride and its water-soluble salts
Ethylene glycol
Xylene11,732
2,031

4,541

3,787

8,469

8,203

5,914

2011

2012

2013 (FY)

Methylnaphthalene
Others.BUFSJBMCBMBODFPG1353SFHVMBUFETVCTUBODFT
Volume of substances handled

Waste

5,083 kg/year

Transferred to sewage

180 kg/year

On-site landfill

0 kg/year
2,335 kg/year

Recycled

195 kg/year

Volume of substances consumed

Released into the air

19 kg/year

Released into water

0 kg/year

ENVIRONMENT

Removed11,732 kg/year

3,920 kg/year

Input and output (FY2013)
Change fromprevious year

Input
Energy (crude oil equivalent)(Breakdown) Electricity

69,684 kl+5.0%

262.15 million kWh+4.3%

Gas (crude oil equivalent)

2,668 kl +36.0%

Fuel (crude oil equivalent)

1,216 kl

-20.1%

1.182 million m

3-0.9%

11.7 tons-18.2%

99 tons-25.0%

Water
Chemical substances(Class I Designated Chemical Substances under the PRTR system)

Paper (copier paper)
Material/packaging material
Glossary

Change fromprevious year

OutputCO2 emissions from energy consumption

TELGroup

140,712 tons +37.7%

Waste

7,960 tons

-38.2%(Breakdown) Recycled amount

7,745 tons

-38.3%

215 tons-35.0%

9,634 tons

-36.8%

Amount of incinerated/landfill waste

Total product shipment

Pollutant Release and Transfer Register. A system under which the use of chemical substances that may be hazardous to human health and the*3 PRTR:
ecosystem, their release into the environment, and their transfer (contained in waste) off the original business premises are identified, tabulated, and disclosed
31