Flowmeters for Utility
Clamp-on UltrasonicFlowmeter
We have a lineup of various time-flight typeultrasonic flowmeters for general piping andprocesses. The sensor can be attached fromthe outside of pipe, and measurement ispossible without contacting liquid.

Thermal Flowmeter
TH series Flowmeters are Tokyo Keiso's original
thermal flow meters for gases based on the heattransfer theory. The sensor is available for process
pipeline diameters from 15 to 1500mm to meet various
applications. Electrolytic polishing option is alsoavailable.

UL330

TH-1100

TH-1200

Standard Model

Insertion type detectorFlange type detector

Flowmeters
for Semiconductor

Industry
Flexible support for 25 to 400 mm piping.
Ideal for measuring pure water flow rates forsemiconductor equipment etc.

Process Connection

1-1/4” ASME Class150 Flange

Process Connection

Flange connection

Piping Size

50mm 〜 350mm
Option 400mm〜1500mm

Piping Size

50mm 〜 150mm

Max Op. Temp. segment 80℃ / 180℃

Max Op. Temp. segment 80℃ /180℃ /240℃
Max Op. Pressure

1.0 MPa max.

Flow range

Max : Air 0 〜 681490m³/h(nor)Min : Air 0 〜 45m³/h(nor)UL350

TRX-600

High-performance ModelConverter

Max Op. Pressure

1.0 MPa max.

Flow range

Max : Air 0 〜 7360m³/h(nor)Min : Air 0 〜 45m³/h(nor)With straightener built in
Max : Air 0〜2605m³/h(nor)Min : Air 0〜5m³/h(nor)Protective Construction IP65equivalent
DisplayUpper side : Flow rate 6-digit LED
Lower side : Integration 8-digit LED

OutputAnalog : DC4 to 20mA
Instantaneous flow,
Integrated flow : RS-485

Accuracy

2.0% F.S. ±1digit

Flexible support for a wide range of pipingfrom 25 to 1000 mm.
RS-485 digital communication.

Specification is subject to change without notice.

Head Office:Shiba Toho Bldg 1-7-24 Shibakoen, Minato-ku, Tokyo, 105-8558
Tel: +81-3-3431-1625(KEY); Fax: +81-3-3433-4922
e-mail: overseas.sales@tokyokeiso.co.jp ; URL:https://www.tokyokeiso.co.jp

SP-F2259-E00 1st edition Jun 2022 E

Flowmeters for Semiconductor manufacturing equipment
Clamp-on Ultrasonic Flowmeter

GST/SFC011GS

High precision Ultrasonic Flowmeter

Measurement target

UF

Ultrasonic flowmeter sensor

PFA Integrated Ultrasonic Flowmeter

Fluid temperature

0.5 MPa max.

Flow range

Max : 0~2.0L/min
Min : 0〜0.5L/min

Compatible tube size

PFA
1/8” , 1/4” ,4 mm, 5 mm, 6 mm
±2% R.D (> 0.8 L/min)Accuracy

UCUF-E

UCUF-KA P FA u l t r a s o n i c fl o w m e t e r d e s i g n e d f o r
high-precision measurement of small-flow ultra-purewater and various chemicals. The wetted parts are all
made of PFA, and there are no moving parts, nomechanical seal parts such as O-rings that easily
cause liquid pooling, and an ideal clean structure.

At normal temperature(temperature change ±0.5℃)

Fluid pressure

The UF is an integrated ultrasonicflowmeter with a display that uses astraight PFA tube.

GST

Pure water, Photo resist,
Low-K material, Thinner

SFC3000/SFC4000
SFC011GS

Clamp-on UltrasonicFlowmeter

UCUF-E / UCUF-K

Guided wave clamp-on ultrasonic flowmeter
Clamp-on ultrasonicflowmeter for PFA small
diameter tubes. Ideal forprocesses that require highcleanliness, such as semiconductor
manufacturing equipment.
The converter is multi-channel
compatible, and one converter canconnect up to 6 detectors.

Ultrasonic Flow Monitor

Measurement target

Pure warer, Water

Fluid temperature

10 〜 90 ℃

Fluid pressure

0.5 MPa max.

Flow range

Max : 0~150L/min
Min : 0~20L/min

Meter size

1/2", 3/4", 1"

Accuracy±2 % F.S. (1 digit)

Clamp-on ultrasonic meter for PFA
tubes. Compatible with tube sizes
from small diameter up to 1” . The
lineup of converters are 1ch typeand multi-channel type, and one
converter can connect up to 6detectors.

SFC3000

UCUF-02M/
SFC-010L
Ultrasonic flowmeterfor small liquid flow rateA PFA ultrasonic flowmeter forsmall liquid flow rates with asmallest full-scale flow rate of
10mL/min.
Measurement target

All liquids

Fluid temperature

10 〜 90 ℃

Fluid pressure

0.5 MPa max.

Flow range

Max : 0~100L/min
Min : 0~10mL/min

Meter size

2.5 mm

Accuracy±1 % R.D （≧ 25 mL/min）

Measurement target

All liquids

Fluid temperature

10 〜 60 ℃

Fluid temperature

Fluid pressure

0.5 MPa max

Flow range

Max : 0~80 L/min
Min : 0~50 mL/min

UCUF-E；4 mm、 6 mm
UCUF-K；10 mm, 15 mm, 20 mm

Accuracy±1 % R.D (Flow velocity≧1 m/s）

0.5 MPa max.

Flow range

Max : 0~80L/min
Min : 0~3L/min

Accuracy±2 % R.D (> 0.8 L/min)

UCF006
Flow Controller

CLFC300

Measurement target

Pure water, Water

Flow range

0 〜 8 L/min

Fluid temperature

10 〜 80 ℃

Meter size

6 mm

Fluid pressure

0.5 MPa max.

Accuracy±2 % R.D (> 1.7 L/min)

Vortex Flow Sensor

VF-2000
VF-3000

Integrated type flow controller
This is a flow controller that uses a PFA
high-precision ultrasonic flowmeter forflow detection and integrates thecontrol valve and control circuit section.
Ideal for semiconductor manufacturing
processes and chemical solution control processes.
It can be used for flow control of pure water, ultrapurewater, various chemicals, CMP slurries, etc.

Vortex flow sensor

UCUF-02M

Ultrasonic Flowmeterfor high temperature liquid

UCUF-04MT/
SFC-010T
Ultrasonic flowmeter forhigh temperature liquid
SFC-010L

10 〜 60 ℃

Fluid pressure

Compatible tube size PFA
6 mm, 8 mm, 10 mm,6.35 mm, 9.53 mm,12.70 mm, 19.05 mm, 25.40 mm

Ultrasonic Flow Monitor

SFC4000
Meter size

SFC011C

Measurement target All liquids

A compact PFA
ultrasonic flow monitor for water.

Ultrasonic Flowmeterfor small flow rate

UCL

Clamp-on ultrasonic flowmeter

Compact ultrasonicflow monitor

Ultrasonic flowmeter converter

UCL/
SFC010C(1ch)
SFC011C(6ch)

A PFA ultrasonic flowmeterf o r h i g h - t e m p e r a t u reliquids that can handle
fluid temperatures up to180℃

VF-2000 is a PPS vortex
flow sensor for liquids withexcellent cost performance.
VF-3000
The VF-3000 is a New PFA vortex
flow sensor. With a simple and clean
structure, it is ideal for controlling the flow rate ofultra-pure water, water, low-viscosity chemicals, etc.
VF-2000

UCUF-04MT

VF-3000

Measuring fluid

Pure water, Water, Cooling water

Measuring fluid

Fluid temperature

0 〜 70℃

Fluid temperature

Pure water, Chemicals
0 〜 90 ℃

Fluid pressure

1 MPa max.

Fluid pressure

0.5 MPa max.

Flow range

Max: 4 〜 40 L/min
Min: 0.5 〜 4 L/min

Flow range

Max: 15 〜 150 L/min
Min: 0.3 〜 2.5 L/min

Body material

PPS resin(Polyphenylene sulfide)

Body material

New PFA

Small Variable Area Flowmeter

P series Purge meters
Purge meter is a small variable area flowmeter.
Measures and displays the flow rates of liquids andgases. We respond with a wide lineup from various
device installations to processes. Recommended for gas
flow rate control in semiconductor manufacturing
equipment.

SFC-010T
Measurement target All liquids

Flow range

Max : 0.8~2.0L/min
Min : 0.1~0.8L/min

Fluid temperature

10 〜 180 ℃

Meter size

4 mm

Fluid pressure

0.5 MPa max.(fluid temperature<120℃)

Accuracy±1% R.D (flow velocity≧1m/s or more)

P-880

P-510

P-771

P-710