En vir o n m e n t a l R e p ort

Plant and Office Initiatives for the Environment– Preventing Global Warming
TEL has reduced its overall energy consumption and is doing its share to prevent further global warming.

Reducing Energy Consumption

Electrical Consumption

Many of TEL’s manufacturing plants are classified as Type 1
Designated Energy Management Factories under Japan’s
Law concerning the Rational Use of Energy and are promoting energy conservation in accordance with the provisions of the law.
Each plant is working actively with the program andhas established goals for saving energy used by lighting
and office machines, for managing air conditioner temperature settings, and so on. They have also instituted fullmachine shutdowns during three-day weekends and task
efficiency drives to achieve further energy savings.
Koshi plant reduces the volume
of air circulation in its clean rooms
and reduces lighting in logistics areas
during the night and days off. It has
been praised for its approaches, andin February 2005 was presented witha commendation for its efforts in conserving energy by the Kyushu Bureau
of Economy, Trade and Industry Kyushu Bureau of Economy,
Trade and Industry(Electrical Division).

(100,000 kWh)Japan

Heavy Fuel Oil Consumption(kl)Overseas148 160 150

126

1,916

2,345
101
2,181
2,191
2,151
1,858
1,501
1,212
1,206
1,089
0

967 958

0

97 98 99 00 01 02 03 04 05

Kerosene Consumption

908

Gas Consumption

Total Energy Consumption (CO2 Equivalent*1)(t-CO2)(%)

CO2 emissions
Numbers standardized per unit of FY1998 sales *2
Per unit of sales relative to previous year*3
208.0%
193.1%

104.4% 150.9%
95.8%
100.0%

147.5%

89.3%

738
545
364

403 389

62 60 66 70 50 59

74 72 55 59 66 66 63 58 56

97

98

99

00

01

TEL uses perfluorocarbons (PFCs) and SF6 (sulfur hexafluoride), which are greenhouse gases, in dry etching (erosion of a substance without liquid chemicals), washingand other processes during process development and process evaluation. We also use HFCs, which are CFC substitutes, for cleaning the chambers of our assessment equipment and other tasks. Our total usage of greenhousegases in FY 2005 was about 7,500 tons (CO2 equivalent).
We will continue to manage and reduce our usage ofthese gases.

(t-CO2)
10,082
92.8% 87.1%

02

03

04

05

PFCs

Other
18

SF6

Other
56

7,422

6,740
0

(Plants in Japan and overseas)

TOKYO ELECTRON Environmental and Social Report 2005

HFCs

9,162

87.7%

*1 For CO2 equivalent, see the Ministry of the Environment’s “Environmental Activity
Evaluation Program.”*2 Unit of sales = energy consumption/sales (FY 1998 = 100%)*3 Year-on-year ratio = current year emissions per unit of sales/previous year emission per unit of sales

22

97 98 99 00 01 02 03 04 05(Plants in Japan and overseas)

Reducing Use of Greenhouse Gases

45,922 50,488 52,456 65,817 84,761 94,009 95,486 95,487 104,110
097 98 99 00 01 02 03 04 05

0

Greenhouse Gas Consumption

197.0%

78.4%

City gas

168.2%

150.8%
134.7%
105.6%

LPG

1,062
990 990
942

658

0

The utilization rate of TEL’s manufacturing facilities rose thisyear, following the rise the previous year. The total amount ofenergy consumed rose with the increase in our production,
but the energy per unit of sales was reduced. The energy
use per unit of sales (a measure in which the benchmark
1997 level is equal to 100%) met the target reduction of 1%
from the previous year. Efforts for conserving energy will bestrengthened under the impetus of the Kyoto Protocol.

97 98 99 00 01 02 03 04 05(1,000 m3)

(kl)
996

1,838
1,828
1,631

1,881

1,652

Director’s Prize

Energy Consumption

2,430

Other
19

6,682
6,297
1,856
1,284
0

1,468

1,140

03

04

784
322
05
(Plants in Japan)

Envir o n m e n t a l R e p ort

Plant and Office Initiatives for the Environment– Waste Reduction and Recycling
TEL is working to decrease its volume of wastes and improve recycling efficiency in order to decrease its environmental burden.

Approach to Waste Reduction and Recycling

Breakdown of Wastes

The Group is working seriously to reduce wastes, following its policy to generate as few wastes as possible, torecycle as many of those we produce as possible, and to
dispose of the non-recyclable remains properly. There area dwindling number of waste disposal sites, so landfill
fees are rising fast. Reducing wastes is an integral part of
reducing costs.
Specifically, TEL has programs to separate wastes, tofind new recycling services, to manage the certification ofmembers of the waste disposal industry, to verify contractors’ disposal methods regularly, and to modify its own
production processes to eliminate waste. TEL also puts up
easy-to-understand displays in all its plants showing how
to separate wastes. It hascreated and is using training materials in Yamanashi plant which show how
to separate wastes suchas paper, PET bottles,
drink cans, bottles, etc.

Liquid chemicals are the largest portion of the wastes
generated by TEL. Chemicals are used in the development
and evaluation of products and then disposed of. Currently, nearly all of the liquid wastes we generate Breakdown of Volume of Wastes
Drink containers
Kitchen garbage 1%
1%
and dispose of externally
Other
scrap,
6%
are recycled. Some of Wood
Packaging5%
our facilities have also
Plastic 7%
implemented equipment
internally for processing
Paper 7%
Liquids
62%
waste fluids, and these
Metallic/
Product wastes
are working to reduce11%
wastes through internal
processing of their liquid
chemicals.

Waste separation procedures information

Total Waste and Recycling Rate
The amount of TEL waste reaching landfills and our recycling rate are summarized in the table below. We haveraised our recycling rate every year through steady efforts
for more effective use of resources.
We have had a program promoting a goal of an overall
TEL group average recycling rate of 95% by FY 2006; in
FY 2005 we reached a rate of 96.1%, a year ahead ofschedule. In the future, we will emphasize reducing the total
amount of wastes, including those we are able to recycle.

Recycling Rate and Amount of Wastes(t)Amount of wastes(incinerated and landfill)(%)

Recycling rate

96.1%
Target recycling rate 95%
93.1%(FY 2006 target)
69.7%
77.4%
59.9%
55.2%

Zero Emissions
TEL defines facilities where fewer than 2% of wastes areincinerated or sent to a landfill as “zero-emissions facilities.” The entire Group participates in zero-emissions activities. Following up on the successes of the previous year,
zero-emission status was achieved by all five facilities ofTokyo Electron AT (Hosaka, Fujii, Miyagi, Tohoku and Amagasaki) in FY 2005. Facilities besides manufacturing plants
are also working to reach zero-emissions in the future.

T OP I C S
Wastes separated into 31 groups
for recycling at Tohoku Plant
At Tohoku Plant, wastes from the manufacturing processes
and offices are separated into 31 types for recycling. For example, sludge is left after liquids are neutralized; the sludge is thenrecycled for use as raw material for production of stainlesssteel. As another example, cable and controllers were once
excluded from recycling because they consisted of a mix ofplastic and steel, but now they can be recycled. Methods havebeen established for re-using every one of our waste materials.
Examples of Recycled Wastes

49.7%
40.9%

15.3%

Material type
Steel · Stainless steel
Aluminum · Drink containers

Material type
Steel · Stainless steel
Aluminum · Drink containers

Copy paper Vending machine cups
Cardboard boxes
Sludge from dining room waste

Toilet paper
Cardboard boxes
Organic fertilizer
Toner cartridges

Toner cartridges
4,238

4,772

3,189

3,179

3,657

3,938

3,268

0

847

431
0

97

98

99

00

01

02

03

04
05
(Plants in Japan)

Waste fluids

Release into river after neutralization
Feedstock for stainless steel
from neutralization sludge

TOKYO ELECTRON Environmental and Social Report 200523

En vir o n m e n t a l R e p ort

Plant and Office Initiatives for the Environment– Resource Conservation
TEL is encouraging reductions in the amount of resources used.

Our Approach to Resource Conservation

Reducing Water Consumption

We are keeping our use of resources to the lowest possible volume with a procurement program that emphasizes
respect for the environment. We are reducing the amountof copy paper and stationery purchased and used, buying
eco-friendly products and collaborating with manufacturers to recover products that have reached the end of theiruseful life.

TEL’s manufacturing plants are conducting a wide spectrum of activities to reduce the volume of water they consume. We are taking other measures to conserve waterwith systems to recirculate cooling water and other fluids
in all our manufacturing processes, and automatic faucets
in washrooms and other sanitation facilities to eliminate
water wasted by users’ forgetting to turn it off or othercarelessness. TEL has been praised for its initiatives.
Koshi plant was awarded a prize for its conservation ofwater in the Higo area (see “Communication with Stakeholders,” p. 30).

Efforts to Reduce Paper Usage
TEL is addressing the issue of reducing usage of paper.
For example, now we photocopy on both sides of paper,
encourage reduced-size copies and have developed digitalized forms for many kinds of announcements and messages. We are taking other steps to preserve forest
resources as well; for example, we use recycled paper for
all but special uses, and paper cups made from kenaf, a nonforest product. In spite ofthose efforts, however, ouruse of copy paper in FY 2005
rose by about 10% (6,580,000
sheets) over the previous year.
The main reasons for thiswere the increases in sales
and shipments. We will continue reviewing the usage of
copy paper in our facilities, toconsolidate records and forms,
and ultimately, to reduce ourpaper consumption.
Poster urging our employees
to use less paper

Copy Paper Consumption
Manufacturing plants(1,000 sheets)

Office facilities

131,500
19,350107,367
18,30095,78587,634
18,617

94,217
17,41718,184

Water Consumption(1,000 m3)

693
521
0

172
97

Overseasuse
817

Industrial
972
146

770

812
89

527

445

391

290

325

332

390

98

99

00

01

436

Tap water
1,039
62

1,014
64

1,004
106

388

474

486

437

415
357
430
391
107
88
70
67
02
03
04
05
(Plants in Japan and overseas)

TOP I C S
Reducing water consumption
at Saga plant
Saga plant is making great efforts to reduce water consumption during development, evaluation and inspectionsof products. About 90% of its water consumption is forindustrial purposes. It produces the highly pure water itneeds for product inspections from the regular industrial
water supply. Used water is recovered and subjected toreverse osmosis to re-purify it for re-use; this volume isabout 300 tons/day. The plant is pursuing other water
conservation projects, including recirculation of coolingwater in manufacturing
processes, replacing
water-cooled vacuum
pumps with air-cooledmodels, and comprehensive conservation ofwater for personal use.

112,150
89,067

Reverse osmosis system
for recovering water
77,16869,45076,800

Water consumption at Saga plant(1000 m3)

Tap water
272

0

01

02

03

04

207

0

65
02

TOKYO ELECTRON Environmental and Social Report 2005

Industrial water

241

218

209

207

190

189

34
03

28
04

20
05

05
(Plants in Japan)

24

Groundwater

1,004
119

Envir o n m e n t a l R e p ort

Plant and Office Initiatives for the Environment– Management of Chemicals
TEL is working to prevent environmental pollution before it happens by expanding its chemical substancemanagement.

Our Approach to
Chemical Substance Management

Emissions of Class 1 DesignatedChemicals under PRTR Law

The main use of chemicals at TEL occurs in two stages: inthe evaluation of our products’ performance during development and in inspection and evaluation during manufacture.
During the development stage, chemicals are occasionallyused which have never been used before, or in ways inwhich they have never been used. Before such new uses,
the system is built to verify the new substances or methods. The risks to the environment and to industrial safety
are assessed so that the necessary measures can be taken
before the actual applications begin. TEL is changing overto chemicals which pose as little danger or toxicity as possible for use in inspection and evaluation during manufacture.

TEL is continuing its programs to reinforce management of
all chemicals in accordance with the law and has achieved
a better grasp of the amounts which it handles and which
it sends out for disposal. Hydrogen fluoride, one of thesubstances designated in the PRTR Law which we use inhigh volume, is generally used for cleaning test wafers.
Used hydrogen fluoride is removed by specialist contractors or handled appropriately within the company. In thesame way, we also use large amounts of ethylene glycol
as a heat-transfer medium for cooling water, but nearly all
the ethylene glycol is recycled after use. We will continue
to exercise the appropriate level of risk management ofchemicals. Since the amounts we use are increasing, we
will also be looking for ways to reduce our consumption.
* PRTR (Pollutant Release and Transfer Register): A framework for controlling chemical
substances that may be hazardous to ecosystems and human health. It involves
determining, compiling and reporting on the amounts of chemicals used, released
into the environment and contained in waste transferred off-site.

Amounts of PRTR Law Class 1 Chemicals

207
227
260
283
311
Sum

(kg)

Name of Class 1 Designated Chemical

FY 2002 FY 2003 FY 2004 FY 2005

Water-soluble zinc compounds
Acrylic acid
2-Aminoethanol
Ethylene glycol
Ethylene glycol monomethyl ether
XyleneDiphenylmethane-4,4’-diisocyanate
N,N-dimethylformamide
Water-soluble copper salts(except complex salts)
ToluenePyrocatechol
Hydrogen fluoride andits water-soluble salts
Manganese and its compounds

0
0
520
1,500
120
180
0
290

50
0
430
4,000
0
0
0
450

0
0
0
9,144
0
0
0
309

70
20
475
6,353
0
0
14
131

190

120

0

110

620
0

0
30

0
0

5
3

2,470

3,690

4,558

3,553

0
5,890

900
9,670

610
450
14,461 11,344(kg)
AmountReleased

11

Transferred

3,274

Consumed

14

Eliminated1,960

Recycled

6,085

Sum

11,344

Balance of Materials Designated under PRTR Law
Released to atmosphere 1 kg/yr

Released to water 10 kg/yr

TEL

Total handledamount11,344 kg/yr

Wastes 3,274 kg/yr

TEL’s Response to the PRTR* Law

No.
in the law
1
3
16
43
44
63
78
172

Emission points

Disposed of in landfill
on company site 0 kg/yr

Products
14 kg/yr

Recycled 6,085 kg/yr
Eliminated1,960 kg/yr

PCB Storage
TEL reports how much polychlorinated biphenyl (PCB) weare storing and how much we have disposed of to the
local government every year, in accordance with the Law
Concerning Special Measures against PCB Waste. The
PCB-containing equipment TEL is currently storing consists of two transformers and four condensers; they are invery secure storage.

TOP I C SManagement of chemicals in
Yamanashi plant
TEL has a program which tracks chemical substances
before use, during use and after disposal at our Yamanashi
plant (Fujii and Hosaka facilities). We carry out a risk assessment before we commit to incorporating a new substancein our processes. We have established our own list of 16
banned substances (nine organic chlorine solvents andseven heavy metals). An MSDS* is posted on location
while any chemical is in use, and tasks are restricted toapproved personnel when designated substances are being
used. The destinations are fully informed of the contents ofmaterials to be disposed of so that they can be properly
treated. The Hosaka plant monitors the fluorine concentration of its waste water and has a complete system to maintain it within legal levels.
* MSDS (Material Safety Data
Sheet) : A form with warnings
about the toxicity of a chemical material and instructions
on how to handle it safely.
Management of fluorine
concentration in waste water* Quantities were found in tons in FY 2002, 2003 (Plants in Japan)

TOKYO ELECTRON Environmental and Social Report 2005

25