All-in-one Ultrasonic Flowmeter for Closed LoopControl

CLFC®300 Series
Flow Controller

OUTLINEThe CLFC®300 series is ﬂow controller which integrates all functions of an ultrasonic ﬂowmeter, a control valve, and a circuit for
ﬂow computation and valve control. Its control function can quickly follow the target ﬂow rate. Thus, the CLFC300 is ideal for liquid
control which is essential in semiconductor manufacturing for theconstant supply of chemicals and ﬂow control of DIW and slurry.

FEATURES❏ Improved ﬂow measurement
Flow measurement is stabilized by faster calculation and improved bubble resistance.

❏ Excellent controllability
A quick step response is achieved by state-of-the-art signal
processing technology. The CLFC300 tracks variations in theﬂow and returns it to the set point within 1.5 seconds.

❏ Two valves for wider applications

APPLICATIONS❏ Constant feed of chemical liquids and DIW:

A needle valve is available for chemical liquids and DIW, and a

The CLFC300 ensures accurate and stable feed control ofpinch tube valve for slurry liquids.

chemical liquids and DIW, which was conventionally conduct-

The STA-PURE style pcs tube is adopt to the lineup of pinch

ed by metering pumps and static head tanks.

tubes. This tube has excellent durability and does not need tobe replaced regularly.

❏ Control of concentration:
When CLFC300 are installed both in chemical liquids and pure

❏ Lightweight and compact
An ultrasonic flowmeter, a control valve, and a circuit are allwater lines, they help directly dilute chemicals with pure water
while controlling the concentration accurately and stably.

contained in a single case. In addition, the layout was revised
to make the controller more compact: it is now 20% smallerand 35% lighter.

❏ Constant feed of slurry:
The CLFC300 on various slurry lines of CMP devices ensures
stable and constant feed of slurry and saves valuable liquids.

❏ Easy installation
No complicated piping or wiring is required: simply connect theﬁttings and multi-core cables to complete the installation.

❏ Eco-friendly
Power consumption is reduced by 35%.
All parts are comply with the RoHS requirements.

❏ Corrosion-resistant
The CLFC uses highly-corrosion-resistant PFA and PTFE forwetted parts and ultra-durable PVDF for the case. It is ideal forthe semiconductor industry and other industries that use corro
sive chemicals.

❏ EMC-compliant
The controller conforms to EN 61326-1:2006.
TG-F1086-3E
RevisedJ u l 2015 K
1st edition Oct 2013 K

CLFC®300 Series Closed Loop Flow Controller

SPECIFICATIONS
Two types of CLFC are available depending on the application.
Measuring liquid

Valve typeChemical liquid, pure water

NeedleSlurryPinch tube

Mounting
Horizontal or vertical

Item

Speciﬁcations

Power supply

24 V DC (±10%)Power consumption

Max. 200 mA

Inrush current

1.5 A or less

Applicable standard and EMC compatibility

RoHS
EMC standard: EN61326-1: 2006

Ambient temperature and humidity

5 to 50 °C, 30 to 80 %RH (no condensation)

Measuring/controlling ﬂuid

Any liquids (not including bubbles for stable measurement)

Sonic velocity

1000 to 2200 m/s

Fluid kinematic viscosity

0.3 to 40 mm2/s

Fluid temperature

10 to 50 °C For ﬂuids at more than 50 °C, consult us.
±1 % R.D. for ﬂow rates of 800 mL/min or larger

Flowmeter accuracy±8 mL/min for ﬂow rates of up to 800 mL/min(±2 mL/min for F.S. of 50 mL/min or smaller)
Note: The accuracy is determined by water calibration.

Control accuracy±1.5 % R.D. for a set point

Output accuracy

Additional error for analog output: ±0.2 % F.S.

Input conversion error

Input conversion error for analog setting: ±0.2 % F.S.

Response speed

Needle type : Within 1.5 seconds to ±3.0 % of the set point (Central value)
Pinch tube type : Within 1.5 seconds to ±1.5 % of the set point (Central value)
Needle type : 0.05 to 0.3 MPa

Diﬀerential pressure range for controlMaximum operating pressure

Pinch tube type : 0.05 to 0.2 MPa
0.4 MPa
For slurry (pinch tube valve): 50 to 500 mL/min

Scale range

For pure water and chemical liquids (needle valve):
5 to 50 mL/min through 200 to 2000 mL/min
Total two points, one for set point input signal and one for ﬂow output signal

Analog I/O signal

0 to 10 V : Input impedance 980 kΩ, Output load resistance 500 kΩ or more
0 to 20 mA : Input impedance 250 Ω, Output load resistance up to 600 ΩPower supply: Green LEDIndication

Flowmeter status: Green LEDValve status: Green LED
Open collector: 2 points (NO as standard)Contact output

For abnormal valve status
For abnormal ﬂow rate
Rating: 30 V DC, 50 mA (max.)

Zero adjustment
Wetted parts material

PFA, PTFE, (Pinch tube)
φ 1/4", Super300 pillar ﬁtting

Fitting2

Contact input (short/open at the plus side of the power supply)

φ 1/4", Flare type ﬁtting

Case material

PVDF

Protection code

Equivalent to IP20 (IP54 for the substrate housing)

Mass

Approx. 1 kg (1.3 kg including cables)

TOKYO KEISO CO., LTD.

TG-F1086-2E

CLFC®300 Series Closed Loop Flow Controller

MODEL CODE
Code①−②−Remarks−

③④−

⑤⑥⑦

CLFC300

CLFC300: analog type
T1

①Connection size

1/4"

＊＊

Others (optional)
1②FittingFlare

2Pillar S300 (Standard)③Flow range

250

2.5 to25 mL/min

500

5 to50 mL/min

101

10 to 100 mL/min

151

15 to 150 mL/min

201

20 to 200 mL/min

501

50 to 500 mL/min

102

100 to 1000 mL/min

152

150 to 1500 mL/min

202

200 to 2000 mL/min＊＊＊

Others (optional)④Analog input/output (Set point/Flow out)

D10 to 10 V / 0 to 10 V

D2

4 to 20 mA / 4 to 20 mA＊＊Others (optional)N⑤Valve type

Needle type for chemicals and pure water

SPPinch type for slurry (STA-PURE®)
H⑥Mounting

Horizontal

V⑦Electrical connection

Vertical0Hirose HR30 connector

Example:A controller with a connection size of 1/4", ﬂow rate of 500 mL/min, analog input and output of 4 to 20 mA,
attached with a needle type valve and connectors, to be installed horizontally, will be speciﬁed as follows:① ②③④⑤⑥⑦

C L F C 3 0 0 − T1 2 − 5 0 1 − D 2 − N H 0Notes
1. Choose the pinch type for slurry to avoid deposition. The ﬂow range of pinch-type ﬂow controllers is limited to 50 to 500 mL/min only.
2. The posture of the inner ﬂowmeter diﬀers in horizontal and vertical mounting. Select an appropriate mounting for measurement.
3. The heat from the integrated electronic circuit may raise the temperature of the ﬂuid retained in the controller piping.
4. Consult us for other optional requirements.

TG-F1086-2E

TOKYO KEISO CO., LTD.

3

CLFC®300 Series Closed Loop Flow Controller

DIMENSIONS
Vertical mounting typeComponentsNo.

４

1C LFC 300

58P ower

Material Q'tyRemarks−

1FCV-3000S

Flow sensor

PFA

1

UCUF-04E6/Z

IN-side ﬁtting

PFA

1Super300（φ1/4）

4

OUT-side ﬁtting

PFA

1Super300（φ1/4）

5Side cover

PVDF

1White6Casing

PVDF

1White7Case sealing

EPDM

1−

8LED indicator−

3

Green × 3

9I/O connector−

1HR30-7R-12PC

10 Connector for maintenance −1

HR30-6R-6PC

Parts

1

Control valve

23S ensor

Fitting

Valve typeValve

NeedlePinch

62AB

Flare

1/4" 33.5

33.5

Super300

1/4" 2323Flare

1/4" 33.5

33.5

Super300

1/4" 2326.6

37109Horizontal mounting type
230

7637.5

19.4

152
19.4

515.5

9 104(26.6)

203

４42.5

114.3(23)

899.3

73

65.4
477217

TOKYO KEISO CO., LTD.

3

25TG-F1086-2E

CLFC®300 Series Closed Loop Flow Controller

WIRING SPECIFICATIONS❏ Terminals
I/O connector (HR30-7R-12PC)
Pin No.
123
45
678
9101112Services＋−＋−＋−＋−＋−

Power (24 V DC)
Set point (4 to 20 mA)
Flow out (4 to 20 mA)
Sensor alarm
Valve alarm
Zero adjust
N.C.

Size
Wire color/Dot
Orange/red 1
AWG26
Orange/black 1
Yellow/red 1
Yellow/black 1
Gray/red 1
Gray/black 1
AWG28
White/red 1
White/black 1
Pink/red 1
Pink/black 1
Orange/red 2
Orange/black 2

③②①
⑦⑥⑤④
⑩⑨⑧
⑫⑪

❏ Dedicated cables
5000±50

HR30-7P-12SC（HIROSE）

100±510±1

Multi-core shield cable
φ6. 3

Heat shrink tube

❏ I/O circuits
OutputInput
11. Zero adjust (+)

5. Flow out (+)
6. Flow out (-)

1. Power (+)
7. Sensor alarm (+)
8. Sensor alarm (-)

DC/DCConverter

2. Power (-)

24V DC

9. Valve alarm (+)

3. Set point (+)

10. Valve alarm (-)

4. Set point (-)

Consumable parts
The THV tube used in pinch type is one of consumable parts. The timing of its replacement depends on the operating conditions. It is recommended to replace the THV tube with a new one after about 300,000 times of control motions or after about one year s operation fromthe start-up.
The highly durable STA-PURE tube needs no periodical replacement.

* Specification is subject to change without notice.

Head Office : Shiba Toho Building, 1 – 7 – 24 Shibakoen, Minato-ku, Tokyo 105 – 8558
Tel : +81-3 – 3431 – 1625 (KEY) ; Fax : +81-3 – 3433 – 4922
e-mail : overseas.sales@tokyokeiso.co.jp ; URL : http://www.tokyokeiso.co.jp
TG-F1086-2E

TOKYO KEISO CO., LTD.

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