For flow measurement of semiconductor
manufacturing equipment

GST/SFC011GS
Guides wave Type Clamp-on
Ultrasonic Flowmeter

RoHSOVERVIEW
GST/SFC011GS is a clamp-on ultrasonic flowmeter for small
diameter piping.
There is no need for additional piping work because flow rate canbe measured just by sandwiching the existing tube. The piping isvirtually kept clean.
Most suitable for processes requiring cleanliness such as semiconductor
manufacturing equipment, etc.

ADVANTAGES❏ Clamp-on
Flow rate can be measured just by sandwiching the existing tube.
Essentially clean because it does not contact the piping.
❏ Energy saving and space saving
Simultaneous measurement of up to 6 lines with one SFC011GS.
Multiple units can be connected to each other (No need forcrossover wiring).
❏ High-speed operation
30 ms arithmetic processing.
❏ Zero adjustment
By performing zero adjustment before measurement, it can bestarted under the optimum conditions for the fluid to be measured.
❏ Abundant functions• 7Seg LED (red, 4 digits) indicates instantaneous flow rate andstatus.
• Various analog outputs of instantaneous flow rate (selectaccording to output types).
• Frequency output (1 kHz F.S.), error output, instantaneous
flow rate upper/lower limit alarm, integrated flow rate output,
and integrated flow rate upper limit alarm (open collector).
• Parameter settings and flow rate data acquisition are available
via RS-485 communication.
* RS-485 communication converter (sold separately) is required.
❏ Conformity standards• EMC conformity standards:
EN61326-1:2013
EN61326-2-3:2013• RoHS2 compliance

STANDARD SPECIFICATIONSCommunication protocol : RS-485 Half-duplex communication startstop synchronization
Modbus Protocol, RTU modeBaud Rate
115.2 kbps
Data size
8 bitsParityEvenStop bits
1 bit
Address Switch 01 to 32
Ambient temperature: Single unit: 0 to 45°C,Multiple units: 0 to 25°C
Ambient humidity: 30 to 80% RH(free from dew condensation)
Installation: DIN rail mounting
Structure: Equivalent to IP20 (indoor use)
Material: Heat resistant ABS resin (white)
Weight: Approx. 250g
(including power supply terminals)

DETECTOR SPECIFICATIONSConnection
Structure
Material
Weight: Dedicated cable (standard 5 m)
: Equivalent to IP20 (indoor use)
: PPS GF (30%): Approx. 130g

FLUID SPECIFICATION
Measurement target

CONVERTER SPECIFICATIONSPower supply voltage
Current consumption
Inrush current
Display
Analog output
Digital output: 24 V DC ±10%
: Approx. 350 mA: Approx. 800 mA: 4 digits (Instantaneous flow rate, status): 4 to 20 mA DC (Standard)
Load resistance: 500Ω or less
: NPN Open collector (Normal Open)
Load rating : 30 V, 10 mA DC
Function Frequency output (1 kHz F.S.)
Error output
Instantaneous flow rate upper/lower limit alarm
Integrated flow rate output
Integrated flow rate upper limitalarmFluid temperature
Ambient temperature
Fluid pressure: Purified water, photoresist, low-K material,thinner, etc.
(fluid that does not contain bubbles): Normal temperature (±0.5°C): Normal temperature (±0.5°C): 0 to 0.5 MPa

COMPATIBLE TUBE/ FLOW RANGE/ ACCURACY
Tube

Flow range[L/min]PFA" (O.D.)
PFA" (O.D.)PFA ø4 (O.D.)PFA ø5 (O.D.)PFA ø6 (O.D.)

0 to 0.5
0 to 2.0
0 to 0.5
0 to 2.0
0 to 2.0

Accuracy ✽1±2% of R.D.
Flow rate: ±0.016 L/min for0.8 L/min or less

✽1 Precision for pure water at 20°C after calibration at the time of shipment

TG-F2281-E00
1st edition Aug 2022 K

GST/SFC011GS Guides wave Type Clamp-on Ultrasonic Flowmeter

MODEL CODE
Detector model
GST

Suitable tube
outlineConverter model
◻◻◻
031
040
050
060
063

◻

Remarks(Blank)
/Z"
ø4
ø5
ø6"
Thickness tube
Thinness tube
N/A
With special request ∗1‒◻

‒D‒TTube typeSpecial requirements

SFC011GS

◻

–◻
–0
–1
–2–3

Analog output

Special requirements(Blank)/ZRemarks
4–20 mA
0–20 mA
0–5 V1–5 V
N/AWith special request ∗1∗1: In case special specifications are specified, write “/Z” at the end of the code and describe the content separately.
(Inquire availability of the production for such specifications in advance)

OUTLINE DRAWING
Converter (SFC011GS)

28.8

Detector (GST)

22.5

14

2

3

32.5

163.5

86

9366

117

CONVERTER TERMINALS① Power supply terminals
Terminal
Contents
24 V DC
10V
2
FG
3RS485+4
RS485–
5SG
6② Digital output terminals
Terminal
Contents
CH1 output+
1
CH1 output–
2CH2 output+
3
CH2 output–4CH3 output+
5
CH3 output–
6
CH4 output+
7
CH4 output–
8
CH5 output+
9
CH5 output–
10
CH6 output+
11
CH6 output–
12③ Analog output terminals
Terminal
Contents
CH1 output+
1
CH1 output–
2
CH2 output+
3
CH2 output–
4
CH3 output+
5
CH3 output–
6
CH4 output+
7
CH4 output–
8
CH5 output+
9
CH5 output–
10
CH6 output+
11
CH6 output–
12④Detector connection terminals
Terminal
Contents
CH1 IN connection
IN
CH1
CH1 OUT connection
OUT
CH2 IN connection
IN
CH2
CH2 OUT connection
OUT
CH3 IN connection
INCH3CH3 OUT connection
OUT
CH4 IN connection
INCH4CH4 OUT connection
OUTCH5 IN connection
INCH5CH5 OUT connection
OUT
CH6 IN connection
IN
CH6
CH6 OUT connection
OUT* Specification is subject to change without notice.

Head Office : Shiba Toho Building, 1 – 7 – 24 Shibakoen, Minato-ku, Tokyo 105 – 8558
Tel : +81-3 – 3431 – 1625 (KEY) ; Fax : +81-3 – 3433 – 4922
e-mail : overseas.sales@tokyokeiso.co.jp ; URL : https://www.tokyokeiso.co.jp
2TG-F2281-E00