High ﬂow rate measurement,
Lightweight aluminum alloy bodyTF-4150/4160/4170
THERMAL MASS FLOWMETEROUTLINE
TF-4100 series Thermal Mass Flowmeter for high flow ratemeasurement has been developed by our long experienceand the accumulation of technology for the thermal mass flow
measurement. Low price, but digital indicator (fixed and rotating)excellent in the visibility is built in. Digital and analog interfaces are
fully equipped, and the lightweight aluminum alloy and stainlesssteel are available for main body. The power supply is 12 to 24 V
DC. The rotating indicator type complies with the CE marking.
This thermal mass flowmeter is suitable for the various
applications.

FEATURES❑ Sensor and converter are integrated in one unit with digitalindication. Furthermore, an indication is excellent in visibility for
LED type of self-luminous indication.
❑ An indication part can be rotated according to the ﬂow directon.
(TF-4152- □□ , TF-4162- □□ )❑ It is lightweight because main body is made of aluminum alloy.
❑ The ambient condition of use has been improved. Construction
is equivalent to IP64.
❑ Integration of main body and display has made it simple andcompact.
❑ Theoretically, measurement accuracy is not aﬀected by changes
in operating pressure or temperature.
❑ Digital and analog interfaces are provided.
❑ Pulse output or alarm output can be chosen for open collector.
❑ Since a setup of totalizing rate and alarm point can be made,the correspondence to various applications is possible.
❑ Power supply is 12 to 24 V DC suitable for the sequencer.

MAIN APPLICATIONS❑ Semiconductor ﬁeld
❑ Automobile ﬁeld
❑ Biochemical❑ Precision instrument ﬁeld
❑ Air conditioning application

OPERATION PRINCIPLE
A resistance thermometer Rw is installed in the flow path. Thecurrent I is controlled to keep the temperature difference (Tw− Ta) between the temperature Tw and gas temperature Ta
constant by heating with electric current.
The quantity of heat (Rw x I2) transferred from the resistancethermometer is a function of mass flow rate of passed gas, thus
the mass ﬂow rate can be measured from the electric current I.
The electric circuit to detect the flow is a unique component tocompensate even the minute change of performance with thechange of physical properties value. Thus the mass ﬂow rate canbe measured with high accuracy. The current I is converted to anelectric signal in proportion to the specified flow rate in order tobe output.

IRaRw

Flow

TwTa

SPECIFICATIONS
Measuring object

Air, N2
0 to 4000L/min (nor) TF-415□-□□ 25A
0 to 8000L/min (nor) TF-416□-□□ 40A
Flow range
0 to 16000L/min (nor) TF-417□-□□ 50A
Ambient & gas temperature 0 to 60ºC (No condensation)
Gas pressure
0.1 to 1.0MPa
Accuracy±2% F.S. (1digit of indication accuracy added)
Response
Within 1 sec. (90% response)
Temp. & press. effect
0.1%F.S./ºC, 0.1%F.S./0.1MPa
Rangiability
1:20 (Low flow cutoff: 2.5% F.S.)
Material of Main body A6061-T6 or SCS13 (Selectable)
SUS316, glass, platinum-iridium
gas contact Sensor
partFluororubber and NBR
Seal
ABS resin
Case
Process connection
Rc1, Rc1.1/2, & Rc2 (Depending on model)
Electric connection
Exclusive cable with connector (5m long) AWG24
Installation posture
Horizontal or vertical
7 segments Red LED, 5 digits
Flow rate, totalization, setting value & error
Momentary flow rate: 0.00 to 99999.
Indication• A decimal point is displayed by automatic change.
• An integrated value is not held at the timeof a nonpower supply. Red LED × 2 pcs.
Lighting when alarm is operating.
0 to 5 V DC (Output impedance: 50 Ωor less), or 4 to 20 mA DC (Load resiAanalog
stance: 300 Ω or less for 12 V power
supply; 600 Ω or less for 24 V power
supply) (Selectable)
RS-485, 2-wire connection, asynchronous serial communication
Output*DigitalCommunication speed: 2400, 4800,
9600 bps (Selectable)Protocol: 8N1, ID address: 00 to 99
Integrating Open collector (30VDC, less than 100mA)
pulse• 0.2 to 10.0% F.S.·min/pulse (Selectable)
Open collector (30VDC, less than 100mA)
Alarm
12 to 24VDC, Max.200mA
Power supply
Conformity (rotating indicator type only)
CE marking* Integrating pulse and alarm (upper/lower) can not be outputtedat the same time.

TG-ES841-6E
RevisedJun 2016 K
1st edition Nov 2005

TF-4150/4160/4170

THERMAL MASS FLOWMETERMODEL CODE AND PRESSURE LOSS
̶TF-41
Nominaldiameter,Connection,
Scale range

DescriptionMax. pressure loss*3

525A, Rc 1,0 to 4,000 L/min (nor)39 kPa

640A, Rc 1 1/2, 0 to 8,000 L/min (nor)

33 kPa

50A, Rc 2,39 kPa

7Direction of theconnector and the 1indicator2
Body material
Analog output

0 to 16,000 L/min (nor)Upstream connector, Fixed indicator *1

0Downstream connector, Fixed indicator *2
Upstream connector, Rotatable indicator (Except 50A)
0A6061-T6

1

SCS13 (Except 50A)

*1：
TF-41□0-□□
Direction of the indicator*2：

TF-41□1-□□
Direction of the indicator

FLOWFLOW

1 0 to 5 V DC
2 4 to 20 mA DC*3: Pressure loss (at 0.1MPa F.S)
CONNECTOR PIN NO.

DISPLAY
Data displayLED
High alarm LED

12Low alarm LED

3Button switches

48576

ELECTRICAL CONNECTION
Fixed indicator type 0 to 5 V DC output: TF-41□0-□1,TF-41□1-□1
Fixed indicator type 4 to 20 mA DC output: TF-41□0-□2,TF-41□1-□2
Rotating indicator type 0 to 5 V DC output: TF-41□2-□1

Rotating indicator type (4 to 20 mA DC output): TF-41□2-□2
Note: Do not connect the power supply (−) and analog output (−) .

Pin 1[White]Power supply (+)

Pin 1[White]Power supply (+)

Pin 2[Brown] Power supply (-)

Pin 2[Brown] Power supply (-)

Pin 3[Green] Analog output (+)

Pin 3[Green] Analog output (+)

Pin 4[Yellow]

Pin 4[Yellow]

Pin 5[Gray] RS485 (+)

Pin 5[Gray] RS485 (+)

Pin 6[Pink] RS485 (-)

Pin 6[Pink] RS485 (-)

Pin 7[Blue] Pulse (+) or Alarm (+)

Pin 7[Blue] Pulse (+) or Alarm (+)

Pin 8[Red] Pulse (-) or Alarm (-)

Pin 8[Red] Pulse (-) or Alarm (-)

Analog output (-)

Analog output (-)

ROTATABLE INDICATOR TYPE
The indicator direction of rotatable indicator type (TF-4152, TF-4162) can be easily changed at the installation site according to theﬂow directon.

2TOKYO KEISO CO., LTD.

TG-ES841-6E

TF-4150/4160/4170

THERMAL MASS FLOWMETERDIMENSIONS 1
25A, body:A6061-T6
TF-4150-0□

TF-4151-0□

TF-4152-0□
55

56(55)

4-M5 Depth 10(For detector ﬁxation)□55(86)

(105)

40

□55

25A, body:SCS13
TF-4150-1□

176

2-Rc1719.5

712-Rc1

36364-M5 Depth 10(For detector ﬁxation)

176

85

40

4-M5 Depth 10(For detector ﬁxation)

3640(118)

85(83)
71

9.5

176

2-Rc1

9.5

□55

(55)

85(83)

(105)

(55)

TF-4151-1□

TF-4152-1□

55

56

(55)

4-M5 Depth 10(For detector ﬁxation)□55

40A, body:A6061-T6
TF-4160-0□

(86)

(105)

40

□55

176

2-Rc1

71

9.5

712-Rc1

3636

4-M5 Depth 10(For detector ﬁxation)

176

8540

4-M5 Depth 10(For detector ﬁxation)

3640(118)

85(83)
719.51762-Rc1

9.5□55(55)85(83)

(105)

(55)

TF-4161-0□

TF-4162-0□

(63)

40

4-M5 Depth 10(For detector ﬁxation)□70□70(101)(120)

2-Rc1 1/2

188

2-Rc1 1/2

1274

188

85

74

40

4-M5 Depth 10(For detector ﬁxation)

46

4-M5 Depth 10(For detector ﬁxation)(133)

85(98)
40

46

46TG-ES841-6E

74

12188

2-Rc1 1/2

12□70(63)85(98)

(120)

(63)

55

55

5556

TOKYO KEISO CO., LTD.

3

TF-4150/4160/4170

THERMAL MASS FLOWMETERDIMENSIONS 2
40A, body:SCS13
TF-4160-1□TF-4161-1□

TF-4162-1□

(133)

(101)

2-Rc1 1/2

188

74

40

4-M5 Depth 10(For detector ﬁxation)

55(108)85

4-M5 Depth 10(For detector ﬁxation)

1740

94

213

2-Rc2

40

4-M5 Depth 10(For detector ﬁxation)□804694(130)

55(88)

85(108)
17

□70

46

4-M5 Depth 10(For detector ﬁxation)

213

2-Rc2

46(120)

40

□70

85

TF-4171-0□

(88)

(130)

74

2-Rc1 1/2

46

4-M5 Depth 10(For detector ﬁxation)

1240

4674

188

12188

50A, body:A6061-T6TF-4170-0□□80(63)85(98)

2-Rc1 1/2

12□70(63)85(98)

(120)

(63)

55

55

55

56

* Specification is subject to change without notice.

Head Office : Shiba Toho Building, 1 – 7 – 24 Shibakoen, Minato-ku, Tokyo 105 – 8558
Tel : +81-3 – 3431 – 1625 (KEY) ; Fax : +81-3 – 3433 – 4922
e-mail : overseas.sales@tokyokeiso.co.jp ; URL : http://www.tokyokeiso.co.jp
4TG-ES841-6E