Environmental Report 2002

Contents

Corporate Profile
1Company name:Tokyo Electron Limited (TEL)

Striving to be a Truly Globally Excellent Company

3Address:

TBS Broadcast Center, 3-6 Akasaka

TEL and Society

5

Environmental Targets and Results

7

Topics at Major Sites

8

Corporate Profile, Editorial Policy, Range of Coverage

Eco Products

5-chome, Minato-ku, Tokyo 107-8481
Phone: +81-3-5561-7000
Representative:

Tetsuro Higashi, CEO, President

Established:

November 11, 1963

Capital:¥47,213,750,000 (as of April 1, 2002)

Main products:

Semiconductor production equipment

Products with Reduced Environmental Impacts9(developed in-house), flat panel displays

TEL's Eco Products

11(FPD) production equipment (developed in-Green Procurement and Logistics

12house), semiconductor production
equipment (imported), computer network
related products, electronic components

Eco Factory
Waste Reduction and Recycling

13

Energy Conservation

15

Resource Conservation

16

Chemical Management

17

Environmental Management System (EMS)

19

Environmental Education

22

Environmental Accounting

23

Health and Safety

25

Societal Contribution

27

Environmental Communication

29

Site Report: Yamanashi Plant

30

May. 1994
Mar. 1996
Apr. 1996
Dec. 1997
Feb. 1998
Mar. 1998
Mar. 1998
May. 1998
Sept.1998
Nov. 1998
June.1999
Aug. 1999
Dec. 1999
Jan. 2000
Apr. 2000
Apr. 2000
Sept.2000
Dec. 2000
Apr. 2001

1

Standardization & Environmental, Safety Center (Environmental, Health & Safety Center)
Product Safety Subcommittee (TEL Group Worldwide
Product EHS Committee) launched
Environmental Subcommittee (TEL Group EHS Committee)
launched
Sagami Plant earns ISO14001 certification
Tohoku Plant earns ISO14001 certification
Saga Plant earns ISO14001 certification
Kumamoto and Koshi Plants earn ISO14001 certification
Yamanashi Plant earns ISO14001 certification
The TEL Group Credo on Environmental Preservation establishedThe TEL Group Credo and Principles on Safety & Healthcredo established"Safety First" declaration establishedOzu Plant earns ISO14001 certification
The item "Health, Safety and the Environment" added tothe Management Philosophy
Study begins on implementing environmental accounting
Unified safety training system "Safety 2000" implemented
Study begins on implementing LCA (life-cycle assessment)
Study begins on implementing green procurement
Environmental Report 2000 issued
Study begins on implementing environmental training foroffice not yet ISO14001-certified

TOKYO ELECTRONENVIRONMENTAL REPORT 2002

1,530 (as of April 1, 2002)

Group employees:

10,269 (as of April 1, 2002)

Sales (consolidated): ¥417,825,000,000 (FY ended March 2002)

Editorial Policy

Environment, Health andSafety Management

TEL Environmental andSafety Activity Record

Employees:

This is TEL's third Environmental Report. Our first priority has
been to make this report easy to read and comprehensive, to give
you a better understanding of TEL's environmental, health andsafety initiatives, as well as the achievements of its societal contribution efforts during fiscal 2001. The TEL Group's business operations are wide-ranging; therefore, it is our hope that this reportwill gain the widest possible readership and help further to open
channels of communication with all those concerned with TEL. We
welcome your opinions and impressions of this Environmental
Report so that we may continue to develop our Editorial Policy.
The Ministry of the Environment's Environmental Reporting
Guidelines (Fiscal Year 2000 Version) and the guidelines of theGlobal Reporting Initiative, which sets international guidelines forcorporate reporting, helped to guide the creation of this report.

Range of Coverage
Organizations covered: This report covers initiatives of the entire TEL.
<Major Japanese Bases>
Tokyo Electron Limited, Tokyo Electron Tohoku Limited, Tokyo Electron AT Limited,Tokyo Electron Kyushu Limited, Tokyo Electron EE Limited, Tokyo Electron Sapporo
Limited, Tokyo Electron FE Limited, Tokyo Electron Device Limited, Tokyo Electron
Leasing Co., Limited, Tokyo Electron Logistics Limited, Tokyo Electron Agency Limited.
<Major American Bases>
Tokyo Electron America, Inc., Tokyo Electron Texas, LLC, Tokyo Electron
Massachusetts, LLC, Tokyo Electron Arizona, Inc., Supercritical Systems, Inc., Timbre
Technologies, Inc.
<Major European Bases>
Tokyo Electron Europe Ltd., Tokyo Electron Italia S.p.A., Tokyo Electron DeutschlandGmbH, Tokyo Electron Switzerland Ltd., Tokyo Electron Nederland B.V., Tokyo Electron
Espa_a S.L., Tokyo Electron Ireland Ltd., Tokyo Electron Israel Ltd., Tokyo Electron
France S.A.R.L.
<Major Asian Bases>
Tokyo Electron Korea Ltd., Tokyo Electron Taiwan Ltd.,Tokyo Electron (Shanghai) Ltd.

Period covered: This report contains data for the period April 1, 2001 - March 31, 2002.
Areas covered: This reports addresses the TEL environmental management, as well associal and economic aspects of corporate societal contributions andother activities.

In brief...

TEL's primary business is manufacturing equipment used to make semiconductors.
Japan's semiconductor production technolo-

displays (FPDs) involves many processes which

gy is said to be crucial to the entire world, but

require assembly with specialized machinery dur-

TEL got its start offering the most advanced sem-ing each process.TEL provides most major types

iconductor production equipment from the U.S.

of equipment used in the manufacturing process.

to semiconductor manufacturers in Japan. Later,

At present, TEL is the second largest manufactur-

Japanese manufacturers started looking forer of semiconductor and FPD production equip-equipment built to their own specifications, soment worldwide, measured on the basis of sales.

TEL's role grew to include equipment modifica-

TEL started with the import, sales and service

tion. In the process, TEL began to manufactureof U.S.-made products, and since the 1990s, has

equipment for itself. Presently, we have grownexported Japanese-made equipment to semicon-

into a company that develops and manufactures

ductor and FPD manufacturers in countries

nearly all products we carry. Thus, TEL's history

around the world, including the Americas, Europe

is the story of the evolution of a trading company

and Asia. Currently, overseas sales account for

into a manufacturer.

about 70% of total sales.

Manufacturing semiconductors and flat panel

Net Sales by Division(Consolidated)

Net Sales (Consolidated)

Computer Network: ¥17 billion
Others: ¥1.4 billion(100 million yen)
7,238

ElectronicComponents:¥73.7 billion

4,555

4,407

4,178

3,138
Semiconductor and FPD Production
Equipment: ¥325.7 billion

0

Ordinary Income (Consolidated)(100 million yen)

1998.3

1999.3

2000.3

2001.3

2002.3

Number of Employees (Group)
1,192
10,7208,910

8,8369,117

1998.4

1999.4

2000.4

10,269

573
338

620

1998.3

1999.3

2002.3
2000.3

2001.3
1950

2001.4

2002.4FPD (flat panel display): A thin flat display. FPDs include liquid crystal and plasma displays.
Semiconductor and FPD production processes: Semiconductor production processes can be broadly divided into front end
processes, in which circuits are formed on a silicon monocrystal panel (i.e., a wafer), and back end processes, in which packages areassembled. Semiconductors and FPDs are both produced using 200-300 process steps.

TOKYO ELECTRONENVIRONMENTAL REPORT 2002

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