2007A1908                           BL47XU

ᰴ਎ઍ㜞ㅦᦠ߈឵߃⋧ᄌൻశ࠺ࠖࠬࠢߩ⎬㨄✢శ㔚ሶಽశಽᨆߦࠃࠆ⇇㕙ጀലᨐߩ⸃ᨆ
Effect of Interface Layer to High-Speed Rewritable Phase-Change Optical
Recording Media by HX-PES method.
ਛዬ ม (16803), ศᧁ ᣽ᒾ (4423), ૒⮮ ␭ᐢ (19054)
Tsukasa Nakai , Masahiko Yoshiki and Yasuhiro Satohࢃ᧲⦼ ⎇ⓥ㐿⊒࠮ࡦ࠲࡯
Corporate Research & Development Center, Toshiba Corporation
ᄢኈ㊂‫ࠅࠃߟ߆ޔ‬㜞ㅦߦ⋧ᄌൻߔࠆ᧚ᢱត⚝ߩᣇะᕈࠍតࠆߚ߼ߦ‫ޔ‬ᡆੑర♽ߣ౒᥏♽⋧ᄌൻ⤑߳ߩ⇇㕙ጀߩലᨐߩ㆑޿ࠍ᣿ࠄ߆ߦߔࠆߎߣࠍ⋡⊛ߣߒߚ‫⸃ޕ‬ᨆߦߪ‫⎬ޔ‬㨄✢శ㔚ሶಽశᴺ(HX-PES)ࠍ↪޿‫౒ޔ‬᥏♽ߩ଀ߣߒߡ SbTe ♽⸥㍳⤑ߣ⓸ൻ‛♽⇇㕙ጀߩ⚵ߺวࠊߖߦߟ޿ߡᬌ⸛ࠍⴕߞߚ‫⸥ޕ‬㍳⤑ߩଔ㔚ሶᏪߩ⁁ᘒኒᐲ(DOS)ࠍ‫⇇ޔ‬㕙ጀࠍ↪޿ߥ޿႐วߣ↪޿ߚ႐วߩߘࠇߙࠇࠍᲧセߒߚ⚿ᨐ‫ޔ‬⇇㕙ጀࠍ↪޿ߚ႐วߣ↪޿ߥ޿႐วߢ߶ߣࠎߤᄌൻ߇⹺߼ࠄࠇߕ‫⇇ߚ߹ޔ‬㕙ጀࠍ↪޿ࠆ‫ߦ޿ߥ޿↪ޔ‬㑐ࠊࠄߕ‫⁁ࠬࠔࡈ࡞ࡕࠕޔ‬ᘒߩ DOS ߣ⚿᥏⁁ᘒߩߘࠇߣߩᏅߪᲧセ⊛ዊߐ߆ߞߚ‫ޕ‬ᡆੑర♽ߢߪ‫ޔ‬⇇㕙ጀࠍ↪޿ߚ႐วࠕࡕ࡞ࡈࠔࠬ⁁ᘒߩ DOS ߪ‫⚿ޔ‬᥏⁁ᘒߩߘࠇߦㄭߠ޿ߚ߇‫ޔ‬SbTe ♽ߩ႐วߦߪ
ߘࠇߣߪ⇣ߥߞߚ‫ߪࠇߎޕ‬ਔ⠪㑆ߩ⚿᥏ൻࡕ࡯࠼ߩ㆑޿ࠍ෻ᤋߒߡ޿ࠆ߽ߩߣផኤߐࠇࠆ‫ޕ‬The influence of interface layer to the pseudo-binary and/or the eutectic alloy as phase-change recording
material was investigated by using the hard-X-ray photoelectron spectroscopy (HX-PES) in order to clarify thehigh-speed phase-change recording material. The crystallization mode of the pseudo-binary phase-changematerial is different from that of the eutectic alloy phase-change material. An SbTe system alloy recording layer
as the example of an eutectic compound with crystalline (Cry.) and amorphous (Amo.) state, a nitride
compound as interface layers and these combinations were analyzed by the density of state (DOS) for recording
layer of valence band with and without interface layer using actual media like samples. The DOS of the SbTe
alloy recording layer with interface layer is similar to that of sample without interface layer for Cry. and Amo.
state. This behavior is as well as the pseudo-binary alloy as recording layer with interface layer in contrast thatof without interface layer. These results suggest the difference of the crystallization mode between thepseudo-binary alloy and the eutectic compound.
1. ⢛᥊㧦⋧ᄌൻ⸥㍳ᣇᑼߪ‫ޔ‬PD‫ޔ‬CD-RW ╬߆ࠄᆎ߹ࠅ DVD-RAM ╬ߩ⃻ⴕߩᦠ߈឵߃ဳ DVD‫ޔ‬ᰴ਎ઍߩ HD DVD‫ޔ‬BD ߦ↪޿ࠄࠇߡ޿ࠆ‫ޕ‬ᰴ਎ઍశ࠺ࠖࠬࠢߦ߅ߌࠆ㐿⊒࠲࡯ࠥ࠶࠻ߪ‫ޔ‬ᄢኈ㊂ൻ߆ࠄ㜞ㅦォㅍ࡟࡯࠻‫ߜࠊߥߔޔ‬㜞ㅦᦠ߈឵߃ᇦ૕ߩ㐿⊒߳ߣㅴࠎߢ޿ࠆ‫ޕ‬ᄢኈ㊂ᦠ߈឵߃ဳ HD DVD ߢߪ‫ޔ‬㜞ኒᐲൻߦ᦭೑ߥ࡜ࡦ࠼࡮ࠣ࡞࡯ࡉ(L/G)⸥㍳߇ណ↪ߐࠇߡ޿ࠆ‫⋧ޕ‬ᄌൻ⸥㍳᧚ᢱߪ‫ޔ‬L/G ⸥㍳ߦᅢㆡߥ‫ޔ‬GeSbTe ♽ߦઍ⴫ߐࠇࠆ‫ࠆࠁࠊ޿ޔ‬ᡆੑర♽ߩൻว‛ߣࡆ࠶࠻࡮ࡇ࠶࠴ߪ⹣߼ᤃ޿߇࠻࡜࠶ࠢ᏷ᣇะߩࡑ࡯ࠢ࡮ࠨࠗ࠭೙ᓮ߇㔍ߒ޿‫౒ࠆࠁࠊ޿ޔ‬᥏♽ൻว‛ߦᄢ೎ߐࠇࠆ‫᧚ߩࠄࠇߎޕ‬ᢱ♽ߢߪ‫⚿ࠇߙࠇߘޔ‬᥏ൻࡕ࡯࠼߇⇣ߥࠅ‫⇇߼ߚߩߘޔ‬㕙ጀ (Interfacelayer)ߩᓎഀ߽⇣ߥࠆ‫ޕ‬ᡆੑర♽ߢߪ‫⚿ޔ‬᥏ᩭߩᒻᚑ㗫ᐲ߇㜞ߊ‫⚿ߩࠄࠇߎޔ‬᥏ᩭߦࠃࠆ⚿᥏ൻ߇ᡰ㈩⊛ߢ޽ࠆ৻ᣇ‫౒ޔ‬᥏♽ߢߪ⚿᥏ᚑ㐳ߦࠃࠆ⚿᥏ൻ߇ᡰ㈩⊛ߢ޽ࠆ[1]‫ޕ‬ᄢኈ㊂ᦠ߈឵߃ဳ HD DVD ߢߪ‫ޔ‬L/G ⸥㍳ࠍណ↪ߒߚߚ߼ᡆੑర♽ߩ GST‫ ߪ޿ࠆ޽ޔ‬GST ਛߩ Sb ߩ৻ㇱࠍ Bi ߢ⟎឵ߒߚ GeSbTeBi(GSTB)
߇↪޿ࠄࠇ‫⚿ߦᦝޔ‬᥏ൻଦㅴᯏ⢻ࠍ᦭ߔࠆ⇇㕙ጀ߇↪޿ࠄࠇࠆ[2,3]‫ޔߚ߹ޕ‬㜞ㅦᦠ߈឵߃࠲ࠗࡊߢߪ‫ࠅߪ߿ޔ‬ᡆੑర♽ߩ GeBiTe(GBT)ࠍ↪޿ࠄࠇࠆ[4,5]‫ޕ‬GBT ߪ‫ޔ‬GST ਛߩ Sb ࠍቢోߦ Biߢ⟎឵ߒߚ♽ߣ߽⸒߃‫ޔ‬ਔൻว‛ߢߪ⁁ᘒ࿑⊛ߦ߽㘃ૃᕈ߇㜞޿[6]‫ޕ‬౒᥏♽ߪ‫ޔ‬ೋ߼ߦ CD-RW ߦណ↪ߐࠇ‫߹ࠇߎޔ‬ߢࠣ࡞࡯ࡉ⸥㍳ߩᇦ૕ߦ↪޿ࠄࠇߡ߈ߚ‫ౕޕ‬૕⊛ߥ଀ߣߒߡߪ‫ޔ‬SbTe‫ޔ‬GeSb‫ޔ‬GaSb‫ޔ‬InSb ♽߅ࠃ߮ߎࠇࠄߦᷝട‛ࠍട߃ߚ♽ߥߤ߇⍮ࠄࠇ‫ޔ‬⇇㕙ጀ᧚ᢱߣߒߡߪ⓸ൻ‛♽߿὇ൻ‛♽߇ᅢㆡߢ޽ࠆ‫౒ޔߒߛߚޕ‬᥏♽ߩ႐วߦߪ‫⚿ޔ‬᥏ൻࡕ࡯࠼ߩ㆑޿߆ࠄᡆੑర♽ߣߪ⇣ߥࠅ‫⇇ޔ‬㕙ጀߦ⚿᥏ൻଦㅴᯏ⢻ߪ᳞߼ࠄࠇߥ޿ߣ⸒ࠊࠇߡ޿ࠆ‫ޕ‬౒᥏♽ߦណ↪ߐࠇߡ޿ࠆൻว‛ߩⲢὐߪ‫ޔ‬ᡆੑర♽ߩߘࠇࠃࠅૐ޿ࠤ࡯ࠬ߇ᄙߊ‫߇ࠇߎޔ‬㐳ᚲߦߥࠆߣ߈ߣ⍴ᚲߦߥࠆߣ߈߇޽ࠆ‫ޔ߫߃଀ޕ‬౒᥏♽ߩࠝ࡯ࡃ࡯࡜ࠗ࠻(OW)․ᕈߪ‫ޔ‬ᡆੑర♽ߩߘࠇߣᲧセߔࠆߣᔅߕߒ߽චಽߣߪ⸒߃ߥ޿‫ޕ‬ߎࠇߪ‫⸥ޔ‬㍳⤑᧚ᢱ߳ߩᾲ⽶⩄߇‫ޔ‬ᡆੑర♽ࠃࠅ౒᥏♽ߩᣇ߇⋧ኻ⊛ߦᒝߊ௛޿ߡ޿ࠆߣ⠨߃ࠄࠇࠆ‫ߦࠇߎޕ‬ኻߒߡᡆੑర♽ߪ‫ޔ‬Ყセ⊛Ⲣὐ߽㜞ߊ‫ޔ‬ᾲ⽶⩄߇⋧ኻ⊛ߦᒙߊ‫ޔ‬஍ᨆߒ㔍޿߇‫ޔ‬㜞ㅦߦ⋧ᄌൻߔࠆߚ߼ߦߪ‫⚿ޔ‬᥏ൻଦㅴᯏ⢻ࠍ᦭ߔࠆ⇇㕙ጀ᧚ᢱࠍ↪޿ࠆߎߣ߇ᔅⷐߢ޽ࠆ‫ޕ‬ߎࠇ߹ߢㅀߴߡ߈ߚࠃ߁ߦ㜞ㅦᦠ߈឵߃․ᕈ
ߣ⸒߁ὐߢߪ‫ޔ‬ਔൻว‛♽౒ߦߘࠇߙࠇ․ᓽ޽
ࠆ᧚ᢱ♽߇⷗಴ߐࠇߡ޿ࠆ‫ ߩⴕ⃻ߦ․ޕ‬DVD ♽ߦኻߒߡߪᲧセ⊛ᄙߊߩ᧚ᢱ♽ߦߟ޿ߡᬌ⸛ߐࠇߡ߈ߚ‫ޔࠄ߇ߥߒ߆ߒޕ‬ᰴ਎ઍߩ㜞ኒᐲ‫ޔ‬㜞ㅦᦠ߈឵߃ᇦ૕߳ߩㆡ↪ߣ⸒߁ⷞὐߢ⷗ࠆߣ‫ޔ‬චಽߦᬌ⸛ߐࠇߡ޿ࠆߣߪ⸒߃ߥ޿‫ޕ‬
2. ߎࠇ߹ߢߩᚑᨐߣᧄ⎇ⓥߩ⋡⊛㧦ᚒ‫ߦߢ߹ࠇߎޔߪޘ‬ታࡔ࠺ࠖࠕߣหߓጀ᭴ㅧࠍ᦭ߔࠆࡌ࠲⤑ߩࠨࡦࡊ࡞(ታ᭴ㅧࠨࡦࡊ࡞)ࠍ
↪޿ߡ‫⋧ޔ‬ᄌൻశ⸥㍳ᇦ૕ߩ࠺ࠖࠬࠢ․ᕈߦ㊀ⷐߢ޽ࠆ⇇㕙ጀߩ⸥㍳⤑ߦኻߔࠆ௛߈ࠍ⎬㨄✢శ㔚ሶಽశᴺ(HX-PES)ࠍ↪޿ߡ᣿ࠄ߆ߦߒߚ
(2005B‫ޔ‬2006A ᦼ) [7㨪11]‫ߦ․ޕ‬ᚒ‫߇ޘ‬㐿⊒ߒߡ޿ࠆ㜞ㅦᦠ߈឵߃น⢻ߥ⋧ᄌൻ⸥㍳⤑ (GeBiTe♽ว㊄ : GBT)ߦ⌕⋡ߒ‫ޔ‬ᬌ⸛ࠍㅴ߼ߚ‫⚿ߩߘޕ‬ᨐ‫⇇ޔ‬㕙ጀ߇⸥㍳⤑ߩଔ㔚ሶᏪߩ⁁ᘒኒᐲ(DOS)ߦᓇ㗀ࠍਈ߃ߡ޿ࠆߎߣࠍೋ߼ߡ⷗಴ߒߚ‫ᦝޕ‬ߦ⇇㕙ጀߩ㈩⟎ߩᓇ㗀ࠍ⺞ᩏߒߚ⚿ᨐ‫࡞ࡕࠕޔ‬ࡈࠔࠬ⁁ᘒ(Amo.)ߩ DOS ߇⚿᥏⁁ᘒ(Cry.)ߩߘ
ࠇߦㄭߠߊߣ౒ߦ⸥㍳⤑ࠍ᭴ᚑߔࠆర⚛ߩࡇ࡯ࠢ᏷߽ߘࠇߙࠇవ㍈ൻߐࠇࠆߎߣ߇ಽ߆ߞߚ‫ޕ‬ߎࠇࠄߩᬌ⸛ߩ⚿ᨐ‫⇇ޔ‬㕙ጀߪ Amo.‫ޔ‬Cry.ߘࠇߙࠇߩ⁁ᘒߩ⤑ߩဋ৻ᕈࠍะ਄ߐߖ‫ޔ‬Amo.ߩ
DOS ࠍ Cry.ߩ DOS ߦㄭߠߌࠆߎߣߦࠃࠅ㜞ㅦ⚿᥏ൻ‫߈ᦠޔ‬឵߃․ᕈߩะ਄ߦነਈߒߡ޿ࠆߣ⠨߃ࠄࠇࠆ[11‫ޔ‬12]‫ߦ߁ࠃߩߎޕ‬ታ᭴ㅧࠨࡦࡊ࡞ߦߡ‫ޔ‬ฦ᧚ᢱ߿⇇㕙ጀߩ㈩⟎ߩᓇ㗀ߦ㑐ߔࠆ⍮⷗ࠍᓧߚߩߢ‫ߩࠄࠇߎޔ‬ᛛⴚࠍᦝߦ⊒ዷߐߖ‫ޔ‬ታᇦ૕ߘߩ߽ߩ߳ߩዷ㐿ࠍ⹜ߺߚ(2006B ᦼ)‫ޕ‬૗᡿ߗߥࠄ߫‫ޔ‬ታ᭴ㅧࠨࡦࡊ࡞ߢߪ‫ࠬࠔࡈ࡞ࡕࠕޔ‬⁁ᘒߣߒߡߪ‫ޔ‬as depo.ߩ Amo.ߒ߆ᬌ⸛ߔࠆߎߣ
߇ߢ߈ߕ‫ޔ‬ታ㓙ߩᇦ૕ߣห᭽ߥ Cry.ㇱߦ⸥㍳ߐ
ࠇࠆ Amo.ࡑ࡯ࠢ(Mark : re-amorphized : Re-amo.)ߦߟ޿ߡߪ‫ޔ‬⍮⷗߇ᓧࠄࠇߡ޿ߥ߆ߞߚ‫ߎߘޕ‬ߢ‫ޔ‬ታᇦ૕ࠍ↪޿ߡᬌ⸛ࠍⴕ޿‫ޔ‬as depo.ߩ Amo.‫ޔ‬Cry.ߘߒߡ Re-amo.ߩ㑆ߩᲧセࠍⴕߞߚ‫⚿ߩߘޕ‬ᨐ‫ޔ‬as depo.ߩ Amo.ߣ Re-amo.ߦ㑐ߔࠆ⍮⷗߽ᓧࠄࠇߚ‫ޕ‬ᧄ⎇ⓥߢߪ‫ޔ‬ᄢኈ㊂‫ࠅࠃߟ߆ޔ‬㜞ㅦߦ⋧ᄌൻߔࠆ᧚ᢱត⚝ߩᣇะᕈࠍតࠆߚ߼ߦ‫ޔ‬ᓥ᧪ᬌ⸛ߒߡ߈ߚᡆੑర♽ߦട߃౒᥏♽⋧ᄌൻ⤑߳ߩ⇇㕙ጀߩലᨐࠍ⸃ᨆߒ‫ޔ‬ਔ⠪ߩ㆑޿ࠍ᣿ࠄ߆ߦߔࠆߎߣࠍ⋡⊛ߣߒߚ‫᧚ߩ߆ߟߊ޿ޕ‬ᢱ♽ߦߟ޿ߡᬌ⸛ߒߚ߇‫ᧄޔ‬ႎ๔ߢߪ৻଀ߣߒߡ SbTe ♽⸥㍳⤑ߣ⓸ൻ‛♽⇇㕙ጀߩ⚵ߺวࠊߖߦߟ޿ߡႎ๔ߔࠆ‫ޕ‬
3. ⹜ᢱ߅ࠃ߮ታ㛎㧦ಽᨆࠨࡦࡊ࡞ߪ‫ޔ‬Fig.1 ߦ␜ߔࠃ߁ߦታ㓙ߩᦠ߈឵߃ဳశ࠺ࠖࠬࠢߣหߓጀ᭴ㅧࠍ᦭ߔࠆታ᭴ㅧࠨࡦࡊ࡞ߣߒ‫⸥ޔ‬㍳⤑ߪ ZnS+SiO2 ଻⼔⤑ߢⷒࠊࠇߡ޿ࠆ[11]‫ޔߜࠊߥߔޕ‬0.6mmt ߩࡐ࡝ࠞ࡯
ࡏࡀ࡯࠻(PC)ᚑ⤑ࠍⴕ޿‫ޔ‬as depo.ߩࠕࡕ࡞ࡈࠔ
ࠬߣೋᦼൻࡊࡠ࠮ࠬߣห᭽ߦ࡟࡯ࠩ࡯ߦࠃࠅ⸥㍳⤑ࠍ⚿᥏ൻߐߖߚㇱಽߣࠍᲧセߒߚ‫ߙࠇߘޕ‬ࠇ⇇㕙ጀࠍ↪޿ߚ႐วߣ↪޿ߥ޿႐วߩᲧセࠍⴕ޿‫⋧ޔ‬ᄌൻ⤑߳ߩ⇇㕙ጀߩലᨐߩ㆑޿ࠍ⸃ᨆ
ߒߚ‫ޕ‬HX-PES ߩ᷹ቯߪ‫ޔ‬SPring-8 BL47XU ߦ߅޿ߡ R-4000 㔚ሶࠛࡀ࡞ࠡ࡯ಽᨆེ(ࠟࡦࡑ࡯࠺࡯࠲ࠪࠛࡦ࠲␠⵾)ࠍ↪޿ߡⴕߞߚ‫ޕ‬ബ⿠㨄✢ߩࠛࡀ࡞ࠡ࡯ߪ‫ޔ‬8keV ߣߒߚ‫⹜ޕ‬ᢱࡎ࡞࠳࡯ߪ‫ޔ‬੹࿁ BL47XU ߦᣂߚߦዉ౉ߐࠇߚᏅߒㄟߺဳࡎ࡞࠳࡯ࠍ↪޿ߚ‫ޕ‬(i) with interface layers(ii) without an interface layer

Fig. 1 The cross-sectional view of the sample.
⸥㍳⤑ߣߒߡߪ‫ޔ‬SbTe ♽ߩ౒᥏♽⋧ᄌൻ⤑ࠍ↪޿ߚ‫ޕ‬Fig.2 ߦ SbTe ♽ൻว‛ߩ⁁ᘒ࿑ࠍ␜ߔ‫ޕ‬ߎߩ࿑߆ࠄಽ߆ࠆࠃ߁ߦ SbTe ♽ߪ‫ߩ߆ߊߟ޿ޔ‬⚿᥏♽ߣ౒᥏⚵ᚑࠍ᦭ߔࠆ‫ޕ‬ጀߣߩ⋧੕૞↪ࠍࠃࠅ⹦⚦ߦ᣿ࠄ߆ߦߔࠆᔅⷐ߇޽ࠅ‫ޔ‬HX-PES ߩᷓ޿ᬌ಴ᷓᐲ߇ਇนᰳߢ޽ࠆ‫ޕ‬
5. ߹ߣ߼㧦ᄢኈ㊂‫ࠅࠃߟ߆ޔ‬㜞ㅦߦ⋧ᄌൻߔࠆ᧚ᢱត⚝ߩᣇะᕈࠍតࠆߚ߼ߦ‫ޔ‬ᡆੑర♽ߣ౒᥏♽⋧ᄌൻ⤑߳ߩ⇇㕙ጀߩലᨐࠍ⸃ᨆߒߚ‫⸃ޕ‬ᨆߦߪ‫ޔ‬⎬㨄✢శ㔚ሶಽశᴺ(HX-PES)ࠍ↪޿‫౒ޔ‬᥏♽ߩ଀ߣߒߡ SbTe ♽⸥㍳⤑ߣ⓸ൻ‛♽⇇㕙ጀߩ⚵ߺวࠊߖߦߟ޿ߡᬌ⸛ࠍⴕߞߚ‫⸥ޕ‬㍳⤑ߩଔ㔚ሶᏪߩ⁁ᘒኒᐲ(DOS)ࠍ‫⇇ޔ‬㕙ጀࠍ↪޿ߥ޿႐วߣ
↪޿ߚ႐วߩߘࠇߙࠇࠍᲧセߒߚ⚿ᨐ‫⇇ޔ‬㕙ጀࠍ↪޿ߚ႐วߣ↪޿ߥ޿႐วߢ߶ߣࠎߤᄌൻ߇⹺߼ࠄࠇߕ‫⇇ߚ߹ޔ‬㕙ጀࠍ↪޿ࠆ‫ߦ޿ߥ޿↪ޔ‬㑐ࠊࠄߕ‫⁁ࠬࠔࡈ࡞ࡕࠕޔ‬ᘒߩ DOS ߣ⚿᥏⁁ᘒߩߘࠇߣߩᏅߪᲧセ⊛ዊߐ߆ߞߚ‫ޕ‬ᡆੑర♽ߢߪ‫⇇ޔ‬㕙ጀࠍ↪޿ߚ႐วࠕࡕ࡞ࡈࠔࠬ⁁ᘒߩDOS ߪ‫⚿ޔ‬᥏⁁ᘒߩߘࠇߦㄭߠ޿ߚ߇‫ޔ‬SbTe♽ߩ႐วߦߪߘࠇߣߪ⇣ߥߞߚ‫ޕ‬+PVGPUKV[=CW?

Fig. 2 Phase diagram for Sb-Te alloy [6]YKVJQWV#OQ%T[YKVJ#OQ%T[
$KPFKPIGPGTI[=G8?

Fig. 3 The density of states (DOS) for valence bandfor the phase-change recording film (Sb-Tecompound).
4. ⚿ᨐ߅ࠃ߮⠨ኤ㧦
Fig.3 ߦ SbTe ♽⸥㍳⤑߇⚿᥏߅ࠃ߮ࠕࡕ࡞ࡈࠔࠬ⁁ᘒߩᤨߦ߅ߌࠆ⸥㍳⤑ߩଔ㔚ሶᏪߩ⁁ᘒኒᐲ(DOS)ࠍ‫(ޔ‬i)⇇㕙ጀࠍ↪޿ߥ޿႐วߣ(ii)↪޿ߚ႐วߩߘࠇߙࠇࠍᲧセߒߡ␜ߔ‫ޕ‬GBT ♽╬ߩᡆੑర♽ߢߪ‫⇇ޔ‬㕙ጀࠍ↪޿ߚ႐วࠕࡕ࡞ࡈࠔࠬ⁁ᘒߩ DOS ߪ‫⚿ޔ‬᥏⁁ᘒߩߘࠇߦㄭߠ޿ߚ
[11]߇‫ޔ‬SbTe ♽ߩ႐วߦߪ⇇㕙ጀࠍ↪޿ߚ႐วߣ↪޿ߥ޿႐วߢ߶ߣࠎߤᄌൻ߇⹺߼ࠄࠇߥ߆ߞߚ‫ޔߚ߹ޕ‬SbTe ♽ߩ႐วߪ‫⇇ޔ‬㕙ጀࠍ↪޿ࠆ‫ޔ‬↪޿ߥ޿ߦ㑐ࠊࠄߕ‫⁁ࠬࠔࡈ࡞ࡕࠕޔ‬ᘒߩ DOSߣ⚿᥏⁁ᘒߩߘࠇߣߩᏅߪᲧセ⊛ዊߐ߆ߞߚ‫ޕ‬ߎࠇࠄߩ᜼േߪ‫౒ߩઁޔ‬᥏♽⋧ᄌൻ⤑ߢ߽ห᭽ߢ޽ߞߚ‫౒ޕ‬᥏♽ߩ႐ว‫⚿ޔ‬᥏ൻࡕ࡯࠼ߩ㆑޿߆ࠄᡆੑర♽ߣߪ⇣ߥࠅ‫⇇ޔ‬㕙ጀߦ⚿᥏ൻଦㅴᯏ⢻ߪ᳞߼ࠄࠇߥ޿ߣ⸒ࠊࠇߡ޿ࠆ‫⸃ᧄޕ‬ᨆߦࠃࠅ‫ⷐߩߘޔ‬࿃ߩ৻┵߇᣿ࠄ߆ߦߥߞߚߣ⠨߃ߡ޿ࠆ‫⋧ޕ‬ᄌൻ⸥㍳ߪ‫ޔ‬㕖Ᏹߦᄙߊឭ᩺ߐࠇߡ߅ࠅ‫⇇ޔ‬㕙ጀߣߩ⚵ߺวࠊߖࠍ฽߼ࠆߣ‫⤘ޔ‬ᄢߥ⚵ߺวࠊߖ߇޽ࠆ‫ߺ⚵ߩߎߦ․ޕ‬วࠊߖߦࠃࠆലᨐࠍ᣿ࠄ߆ߦߔࠆߚ߼ߦߪ‫⸥ޔ‬㍳⤑ߣ⇇㕙ࠠ࡯ࡢ࡯࠼ 㧦⋧ᄌൻဳశ࠺ࠖࠬࠢ‫ޔ‬HD DVD‫ޔ‬㜞ㅦᦠ߈឵߃ᇦ૕‫ޔ‬ታࡔ࠺ࠖࠕ‫⇇ޔ‬㕙ጀ‫⋧ޔ‬ᄌൻ⸥㍳⤑‫ޔ‬ᡆੑర♽ൻว‛‫౒ޔ‬᥏♽ൻว‛‫ޔ‬GeBiTe(GBT)‫ޔ‬SbTe‫ޔ‬⚿᥏‫⎬ޔࠬࠔࡈ࡞ࡕࠕޔ‬㨄✢శ㔚ሶಽశᴺ(HX-PES)‫ޔ‬ଔ㔚ሶᏪ‫⁁ޔ‬ᘒኒᐲ(DOS)ෳ⠨ᢥ₂[1] ଀߃߫‫ޔ‬E.R.Meinders, et al., J. Appl. Phys., 91(2002) 9794.
[2] N. Ohmachi, et al., Jpn. J. Appl. Phys., 43 (2004)
4978.
[3] T. Nakai, et al., Jpn. J. Appl. Phys., 43 (2004)
4987.
[4] T. Nakai, et al., Proc. 16th Symp. Phase Change
Optical Recording, (2004) p.73.
[5] N. Ohmachi, et al., Jpn. J. Appl. Phys., 45 (2006)
1210.
[6] Handbook of Ternary Alloy Phase Diagrams(Edited by: Pierre Villars, et al.)[7] T. Nakai, et al., Experiment Report &࠽ࡁ࠹ࠢ⺖㗴⎇ⓥᚑᨐႎ๔ᦠ (2005B0232)[8] T. Nakai, et al., Tech. Dig. Int. Symp. Opt.
Memory, We-H-03(2006)[9] T. Nakai, et al., Experiment Report &࠽ࡁ࠹ࠢ⺖㗴⎇ⓥᚑᨐႎ๔ᦠ (2006A1641)[10] T. Nakai, et al., Proceedings of SPIE : ODS ’06,Vol.6282 (2006) p.62800E-1-7.
[11] T. Nakai, et al., Jpn. J. Appl. Phys., 46, (2007)3968.
[12] T. Nakai, et al., Experiment Report & ࠽ࡁ࠹ࠢ⺖㗴⎇ⓥᚑᨐႎ๔ᦠ (2006B1599)[13] Desk Handbook, Phase Diagrams for Binary
Alloy (Edited by Hiroaki Okamoto : ASM).

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