Measurement and control of cleaning andCMP processes
ULTRASONIC COMPACT FLOW METER

UCF006Compact Ultrasonic Flow Monitor

RoHSOUTLINE
The compact ultrasonic flow monitor UCF006 has reduced
significantly the adverse effects caused by the bubbles
contained in semiconductor processes by making themeasuring tube straight with a negligible small pressure
loss. The improved time resolution and high speed signal
processing have made the measurement stable in the low flow
domain compared with the conventional flowmeters.
Thus, it is ideal for the semiconductor manufacturing which
requires ultimate cleanliness.

FEATURES❏ Enhanced resistance to bubbles
The bubbles contained in the liquid disturb the propagationof ultrasonic waves and cause an unstable measurement.
By making the measuring tube straight the stablemeasurement has been realized.
❏ Low pressure loss
The straight measuring tube has a negligible small pressure
loss. It keeps a line pressure.
❏ Saving space
A combined construction of a detector and a convertersaves installation space.
❏ Complying withCleared EMC test : EN61326-1 : 2013
RoHSAPPLICATIONS❏ Pure water and ultrapure water in the semiconductor
manufacturing processes❏ Process liquids of small and medium flow rate
❏ Ideal for flow measurement and control of cleaning andCMP processes

OPERATING PRINCIPLE
Two piezoelectric transducers A and B are mounted at bothends of the measuring tube as shown in Fig.1. They emit
and receive ultrasonic waves alternately and measure thetraveling times tA (A to B) and tB (B to A) through the liquid.
Without flow, tA is equal to tB. With flow, tA becomes shorterand tB longer in proportion to the flow rate. Thus, calculatingtB - tA gives the flow rate of the liquid. tA and tB depend on
the size and shape of the tube and liquid viscosity. The actual
flow test data are stored in the linearizer in the converter,
which enables the UCF006 to measure flow rates with highaccuracy.

Piezoelectrictransducer B
Travelling time tA

IN

OUT

Piezoelectrictransducer A

Travelling time tB

Figure 1 Operating principle

TG-F2397-E00
1st edition Aug 2023 K

UCF006 Compact Ultrasonic Flow Monitor

STANDARD SPECIFICATIONS• Model code		: UCF006• Measuring fluid		: Water• Fluid temperature: 10 to 80°C			 Note : The shaded area in Fig.2 is the				guaranteed temperature				range.
• Ambient temperature: 0 to 50°C			 Note : The shaded area in Fig.2 is the				guaranteed temperature range.
• Fluid pressure		: 0 to 0.5 MPa• Process connection: 3/8˝ PFA tube end (Outside diameter			
φ 9.53, Inside diameter φ 6.35)• Enclosure classification : IP65 equivalent, indoor use• Flow range		
: 0 to 8000 mL/min• Accuracy		
: ±2% of reading at flow rate 1700 mL/			 min or more			 ±34 mL/min at flow rate less than			 1700 mL/min			 When measuring 20°C water• MassBody: Approx. 80 g
Cable
: Approx. 140 g• Cable		: Exclusive multi-core cable for UCF006• Cable length		
: 5 m as standard• Materials		: PFA (Wetted parts)

1) Current output (Analog output): 4 to 20 mA DC (Load resistance within			500Ω)2) Frequency output (Pulse output)		
: Open collector pulse, Load reting 30V			 DC, 10mA, 0 to 1000Hz• Parameter setting: Via RS485 communication (Modbus			protocol)• Power supply		: 24 V DC ±10%
• Power consumption: 38 mA or lower

Ambient temperature• Output

50℃
40℃

0℃
10℃

70℃

80℃

Fluid temperature
Fig. 2 Guaranteed temperature range

DIMENSIONSUCF006(300)
84.8

21OUT

5779.5

13.0

28.5
43

φ6.35

φ9.53

IN

4-M347

CABLE DIMENSIONS
5m
202

TOKYO KEISO CO., LTD.

70mm

TG-F2397-E00

UCF006 Compact Ultrasonic Flow Monitor

PIN ASSIGN
Pin No.

Function

Color

1Pulse output（＋）

Blue

2Analog output（＋）

Green

3

RS485（＋）

Orange

4RS485（−）

Yellow

524 V DC（＋）

Red6GND（−）

Brown

165234

MODEL CODE
UCF006−□□□Flow range□Specifications

030

0 to 3000 mL/min

040

0 to 4000 mL/min

080
Special spec.

0 to 8000 mL/min（Blank）

Not provided/Z

ProvidedMain circuit

CIRCUIT DIMENSIONS

1Pulse output (+)

524 V DC (+)

2Analog output (+)

6

GND (‒)

3

RS485 (+)

4

RS485 (‒)

LoadLoad

CAUTIONS ON INSTALLATION❏ To stable measurement, do not bend the connecting tube during installation.
❏ To stable measurement, stabilize the liquid temperature within ±5ºC.
❏ Install the flow monitor so that no bubbles stay in the measuring tube.
❏ Keep the measuring tube filled with liquids. Although the flow monitor can be installed with horizontal, vertical, or slant tubing,it is recommended to select a position for easy self-draining.
❏ Install a control valve downstream of the flow monitor, if necessary.
❏ Install the flow monitor away from noise sources such as power relays and solenoid valves.
❏ Lay the signal cable away from power cables of high voltage or current.
❏ Install the flow monitor with at least 60 mm upstream and 40 mm downstream, straight runs from the monitor edge faces.
❏ Adjust the zero point again when the fluid temperature fluctuates 10ºC or more.

* Specification is subject to change without notice.

Head Office : Shiba Toho Building, 1 – 7 – 24 Shibakoen, Minato-ku, Tokyo 105 – 8558
Tel : +81-3 – 3431 – 1625 (KEY) ; Fax : +81-3 – 3433 – 4922
e-mail : overseas.sales@tokyokeiso.co.jp ; URL : https://www.tokyokeiso.co.jp
TG-F2397-E00

TOKYO KEISO CO., LTD.

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