Low price & High efficiency

TF-4000 Series
THERMAL MASS FLOWMETEROUTLINE
TF-4000 series Thermal Mass Flowmeter for compactness and highcost performance has been developed by our long experience andthe accumulation of technology for the thermal mass flow measurement. Low price, but digital indicator (fixed type) is built in. Digital andanalog interfaces are fully equipped, and the indication value can be
confirmed at the site, and also it can be controlled at the remote place.
The power supply is 12 to 24 V DC. CE Marking has been obtained forthe fixed type indicator. This thermal mass flowmeter can be used forthe various applications.

FEATURES❏ Indicator: Digital indication.
❏ CE Marked❏ Includes digital and analog interfaces.
❏ Quick response by highly reliable and compact Pt. temperature
sensor.
❏ Low cost secured by the stainless steel precision casting of theflow path❏ Various functions (such as alarm and generation of totalized
pulse) are built in.
❏ Wide flow range enough to cover minimum 0 to 2L/min (nor) andmaximum 0 to 1000Lmin (nor).

MAIN APPLICATIONS❏ Semiconductor field❏ Biochemical field❏ Various precision instrument field❏ Medical field

OPERATION PRINCIPLE
A resistance thermometer Rw is installed in the flow path. The current I is controlled to keep the temperature difference (Tw—Ta)
between the temperature Tw and gas temperature Ta constant byheating with electric current.
The quantity of heat (Rw x I2) transferred from the resistance thermometer is a function of mass flow rate of passed gas, thus the mass
flow rate can be measured from the electric current I.
The electric circuit to detect the flow is a unique component to compensate even the minute change of performance with the change ofphysical properties value. Thus the mass flow rate can be measured
with high accuracy. The current I is converted to an electric signal inproportion to the specified flow rate in order to be output.

I
Ra

Rw

Measuring object
Flow range

Air, N2, & O2
Min. 0 to 2 L/min (nor)Max. 0 to 1000 L/min (nor)Ambient & gas
0 to 60°C (No condensation)
temperature
Gas pressure
0.1 to 1.0MPa±2% F.S. (±1digit of indication accuracy added)
Accuracy
Response
Within 0.5 sec. (90% response)
Temp. & press. effect 0.1%F.S./°C, 0.1%F.S./0.1 MPa
Rangiability
1:20 (Low flow cutoff: 5% F.S.)
Material Main body SCS14
of gas Sensor
SUS316, glass, platinum-iridium, & CTFE
contact
Seal
Fluororubber
part
Case
ABS resin (Non-waterproof)
Process connection Rc1/4, Rc3/8, Rc1/2, & Rc3/4 (Depending on Model)
Electric connection Exclusive cable with connector (1 m long)
Installation posture Horizontal or vertical
7 segments Red LED, 5 digits
Flow rate, totalization, setting value & error Momentary
flow rate: 0.00 to 99999.
• A decimal point is displayed by automatic change.
Indication• An integrated value is not held at the time of a
nonpower supply. Red LED × 2 pcs.
Lighting when alarm is operating.
0 to 5 V DC (Output impedance: 50Ω or less), or 4 to
20 mA DC (Load resistance: 300Ω or less for 12 V power
Aanalog
supply; 600Ω or less for 24 V power supply) (Selectable)
RS-485, 2-wire connection, asynchronous serial
communication
Output* Digital
Communication speed: 2400, 4800, 9600 bps (Selectable)
Protocol: 8N1, ID address: 00 to 99
Integrating Open collector (24 V DC, less than 10 mA)
pulse• 0.2 to 10.0% F.S.·min/pulse (Selectable)
Alarm
Open collector (24 V DC, less than 100 mA)
Power supply
12 to 24 V DC, Max.210 mA
CE marking
Conformity

Fl

ow

Tw

Ta

SPECIFICATIONS

TG-ES823-6E
RevisedJun 2016 K
1st edition Oct 2002

TF-4000 THERMAL MASS FLOWMETER

Rc1/2, 0- 300 L/min (nor), 2.87 kPa (Approx.)
Rc1/2, 0- 400 L/min (nor), 4.28 kPa (Approx.)
Rc1/2, 0- 500 L/min (nor), 6.20 kPa (Approx.)

40–1
40–2
40–3

Rc3/4, 0- 600 L/min (nor), 3.13 kPa (Approx.)
Rc3/4, 0- 800 L/min (nor), 4.11 kPa (Approx.)
Rc3/4, 0-1000 L/min (nor), 6.01 kPa (Approx.)
1 0 to 5 V DC
2 4 to 20 mA DC

Analog output

TF-4000
THERMAL MASS FLOWMETER

B

Wiring Indication
Analog out put（＋）
Analog out put（−）
Open collector high alarm（＋）
Open collector low alarm（＋）
Open collector totalization out put（＋）
Open collector COM
Open collector COM
Power supply（＋）
Power supply（−）
Shield□W

Screw holes locationon the detector bottom
4-M4 Depth 4A(for detector ﬁxation)

SIGNAL, POWER SUPPLY CABLE
Color
Brown
Red
OrangeYellow
GreenBlue
VioletBlack
GrayBlack (thick)

Signal,power
supplyconnector

2-Rc

L❋: Gas pressure 0.1 MPa, pressure loss at max flow rate

Pin No.
1
2
3
4
5
6
7
8
9
̶

31
RS-485Connector
321

30–1
30–2
30–3

（3）

71

9

Loss❋

Rc3/8, 0- 150 L/min (nor), 1.23 kPa (Approx.)
Rc3/8, 0- 200 L/min (nor), 1.72 kPa (Approx.)
Rc3/8, 0- 250 L/min (nor), 2.27 kPa (Approx.)

M

6

Pressure

20–1
20–2
20–3

min
(nor)

L

RS485

range,

LH（83）

size, Flow

Description
Rc1/4, 0- 2 L/min (nor), 0.015 kPa (Approx.)
Rc1/4, 0- 5 L/min (nor), 0.080 kPa (Approx.)
Rc1/4, 0- 10 L/min (nor), 0.25 kPa (Approx.)
Rc1/4, 0- 30 L/min (nor), 0.47 kPa (Approx.)
Rc1/4, 0- 50 L/min (nor), 1.22 kPa (Approx.)
Rc1/4, 0- 80 L/min (nor), 1.82 kPa (Approx.)
Rc1/4, 0- 100 L/min (nor), 2.75 kPa (Approx.)

H

Connection

□

H1

□0–□
10–1
10–2
10–3
10–4
10–5
10–6
10–7

TF-41

DIMENSIONS

1 CN15SCALE RANGE AND MODEL CODE

Model

Connection

L

□W

H

H1

A

B

TF-4110
TF-4120
TF-4130
TF-4140

Rc1/4
Rc3/8
Rc1/2
Rc3/4

76
76
112
136

25
32
38
45

108 12.5 64 10
115 16 64 10
121 19 50 30
128 22.5 70 30

Mass(Approx.)0.35kg0.5kg
0.85kg1.15kg

RS-485 CABLE
Pin No.
1
2
3

Color
Red
Black
Black (thick)

Wiring Indication
RS-485（＋）
RS-485（−）
Shield* Specification is subject to change without notice.

Head Office : Shiba Toho Building, 1 – 7 – 24 Shibakoen, Minato-ku, Tokyo 105 – 8558
Tel : +81-3 – 3431 – 1625 (KEY) ; Fax : +81-3 – 3433 – 4922
e-mail : overseas.sales@tokyokeiso.co.jp ; URL : http://www.tokyokeiso.co.jp
2

TOKYO KEISO CO., LTD.

TG-ES823-6E