FOR HIGH-ACCURACY MEASUREMENT OF THE
MASS FLOW OF VARIOUS GASES

TF-5000/6000 Series
MASS FLOWMETEROUTLINE
TF-5000 / 6000 series are Thermal Mass Flowmeters, which measuremass flow rate of various kinds of gas free from the change of process condition such as pressure and temperature.
TF-5000 / 6000 cover from 0 to 5 mL/min(nor), to 0 to 500 L/min(nor).
Scale range and maximum 32 MPa pressure to meet almost all possible applications.

FEATURES❏ Wide Range
With the full scale range of 5 mL/min(nor) to 500 L/min(nor) andthe maximum operation pressure of 32 MPa, the mass flowmetercovers a wide range of applications from mounting onto laboratory equipment, analyzers, etc. to process control.

TF-5000 / 6000 offer ±1.0%(F.S.) accuracy.

MODEL CODE

❏ High Reliability
Tokyo Keiso long time experience of Thermal Theory Flow
Measurement guarantees reliability and durability.
❏ Supporting Instruments

Model CodeTF-Size

The gas to be measured is directed to by-pass sensing path by flow

Description

0- A B C -Press 5
rating 6

TM3000 convertor unit is available for easy system configuration.

OPERATION PRINCIPLE

3General UseHigh Press. Use
1Very small Flow use

2

Small Flow use

3

Medium Flow use

4
Scale Range

Large Flow use
Full scale

ABCrestriction. At the by-pass sensing path, two resistance coils arePRc Screw

wound which consist a bridge circuit with resistance circuit in elec-N

NPT(F)

tric compartment.

SSwagelok

R

VCR

OVCO

In case of no flow passing through the by-pass sensing path, theConnection Typebridge circuit is in balanced condition.
When the gas moves, the heat at the upstream coils is transferredFto downstream coil and thus upsetting the original heat balance.
Then, the bridge circuit outputs electric signal. Theoretically, the0 6 3/8"

heat transfer is proportional to the moving mass of the gas to bemeasured and its specific heat. The specific heat of the gas is notaffected by its pressure and within reasonable range of temperature,
it can be observed to be as stable.
Thus, by measuring the heat transfer through bridge output, themass flow rate of the gas can be measured. The output signal fromthe bridge circuit is amplified to 0 to 5V DC.

JIS10K Flange
0 4 1/4"

Connection Size0 8 1/2"
1 2 3/4"

Subject to Press rating & size.Refer to■ STANDARD SPECIFICATION
for details❏ High Accuracy

1 6 1"✽①A scale range is shown by the exponential expression as theunit of multiplier unit of mL/min (nor).
Example)0 to 5mL/min(nor) 0 5 0 (5×100)
0 to 500mL/min(nor) 5 0 1 (50×101)
0 to 1L/min(nor) 1 0 2 (10×102)
0 to 300L/min(nor) 30 4 (30×104)✽②Dimension and model code are varied dependingon the scale range.
· Scale range 0 to 20L/min(nor): TF-5310/TF-6310· More than 20 to 80L/min(nor): TF-5320/TF-6320· More than 80 to 300L/min(nor) : TF-5330/TF-6330· More than 300 to 500L/min(nor) : TF-5340/TF-6340(Flow rate has been converted to that of N2 gas.)

TG-F2279-E01
2nd edition Jan 2024 K
1st edition Jul 2022 K

TF-5000/6000 Series MASS FLOWMETER

STANDARD SPECIFICATION

MODEL

TF-5310

TF-5330

Contact us for the applicability of the flowmeter to less common gases.

Min.

0 to 5 mL/min (nor)0 to 20 L/min (nor)0 to 80 L/min (nor)0 to 300 L/min (nor)Max.

0 to 20 L/min (nor)0 to 80 L/min (nor)0 to 300 L/min (nor)0 to 500 L/min (nor)

OUTPUT SIGNAL
ACCURACY

0 to 5 V DC (Linear to 0 to 100% of Scale range)±1.0% F.S. (at RT standard) RT: Ambient temperature of 25°C ±5°C at the adjustmentRESPONSE SPEED

90% within 3sec.

GAS PRESS–0.03 to 0.98 MPa

TEMP. RANGE(GAS & AMBIENT)

5 to 50°C

TEMP. CHANGE
EFFECT
PRESS. CHANGE
EFFECT
POWER SUPPLY(TO DETECTOR)

For span±0.1% F.S./ °C Max.

For zero±0.05% F.S./°C Max.

±0.1% F.S./0.1 MPa Max. *2+15 V DC, 25 mA Max. -15 V DC, 5 mA Max.

MATERIAL

Tube SUS316, Sealing FKM or CR(GAS CONTACT)PROCESSCONNECTION

TF-5340

Gases (excluding chlorine, acid, sulfur, and other corrosive gases)

MEASURING FLUID*1SCALE RANGE

TF-5320

THREADS

Rc1/4,1/4NPT

FITTINGS

OD1/4, 3/8, 1/2 SWAGELOK *3

FLANGES

Rc1/4, 3/8, 1/2,1/4, 3/8, 1/2NPT

Rc3/8, 1/2, 3/4 or 1
3/8, 1/2, 3/4 or 1NPT

OD3/8, 1/2, 3/4 SWAGELOK *3JIS10K 15 A to 25 A

*1: Flow rate of Nitrogen(N2).
See P.6 for conversion factors.
*2: Effect of pressure change on N2 gas. The pressure effect varies with the operating pressure and kind of fluid when the pressure exceeds
1 MPa. (TF-63□0)*3: VCR and VCO are available on request.

2

TOKYO KEISO CO., LTD.

TG-F2279-E01

TF-5000/6000 Series MASS FLOWMETERMODELMEASURING FLUID*1SCALE RANGE

TF-6310

TF-6320

TF-6330

Gases (excluding chlorine, acid, sulfur, and other corrosive gases)
Contact us for the applicability of the flowmeter to less common gases.

Min.

0 to 5 mL/min (nor)0 to 20 L/min (nor)0 to 80 L/min (nor)0 to 300 L/min (nor)Max.

0 to 20 L/min (nor)0 to 80 L/min (nor)0 to 300 L/min (nor)0 to 500 L/min (nor)

OUTPUT SIGNAL
ACCURACY

0 to 5 V DC (Linear to 0 to 100% of Scale range)±1.0% F.S. (at RT standard) RT: Ambient temperature of 25°C ±5°C at the adjustmentRESPONSE SPEED

90% within 3 sec.

GAS PRESS–0.03 to 32 MPa *4

TEMP. RANGE(GAS & AMBIENT)

5 to 50°C

TEMP. CHANGE
EFFECTPRESS. CHANGE
EFFECT
POWER SUPPLY(TO DETECTOR)

For span±0.1% F.S./°C Max.

For zero±0.05% F.S./°C Max.

±0.1% F.S./0.1 MPa Max. *2+15 V DC, 25 mA Max. –15 V DC, 5 mA Max.

MATERIAL

Tube SUS316, Sealing FKM or CR(GAS CONTACT)PROCESSCONNECTION

TF-6340

THREADS

Rc1/4,1/4NPT

Rc1/4, 3/8, 1/2
1/4, 3/8, 1/2NPT

FITTINGS

OD1/4, 3/8
SWAGELOK *3

OD1/4, 3/8, 1/2
SWAGELOK *3

FLANGES

Rc3/8, 1/2
3/8, 1/2
OD1/4, 3/8, 1/2, 3/4
SWAGELOK *3

OD3/8, 1/2, 3/4
SWAGELOK *3

Not Available*4: Flow rate calibration is conducted at a pressure of up to 9.8 MPa.
When higher pressures are specified, a pressure test is conducted at the specified operating pressure, and flow rate calibration isconducted based on theoretical compensation calculation.
The maximum operating pressure is restricted for some gases. For example, the maximum operating pressure of CO2 is limited to 3 MPa.
Confirm the physical properties of the measuring gas beforehand.

TG-F2279-E01TOKYO KEISO CO., LTD.

3TF-5000/6000 Series MASS FLOWMETERDIMENSIONS
TF-5310
Rc connection

SWL connection

VCR connection

2-M4 DEPTH52-M4 DEPTH5

2-M4 DEPTH5Size

Size

TF-5320
Rc connection

JIS 10K FLANGE

Size

2-M4 DEPTH5

2-M4 DEPTH5Size
Type

SWL connection

2-M4 DEPTH5VCR connection

JIS 10K FLANGE

2-M4 DEPTH5

2-M4 DEPTH5Size

Size
Size
Type4

TOKYO KEISO CO., LTD.

TG-F2279-E01

TF-5000/6000 Series MASS FLOWMETER

TF-5330/TF-5340
Rc connection

SWL connection

2-M4 DEPTH6Size

2-M4 DEPTH6SizeModelModel

VCR connection

JIS 10K FLANGE

2-M4 DEPTH62-M4 DEPTH6Size

Size
TypeModel
Model

TG-F2279-E01

TOKYO KEISO CO., LTD.

5TF-5000/6000 Series MASS FLOWMETER

TF-6310
SWLconnection

TF-6310
Rc screwconnection

MASS FLOW METER
TYPE

GAS
FLOW RATEPRESSURE
MFG.NO.

GASFLOW RATEPRESSURE
MFG.NO.

124(146)

TYPE

TOKYO KEISO CO.,LTD.
JAPANTOKYO KEISO CO.,LTD.
JAPAN

FLOW

162-SWL

162-Rc1/4

FLOW

124(146)

MASS FLOW METER

4-M4DEPTH55426
□3226
□32

4-M4DEPTH5155490

1590128

L

CONNECTION
1/4SWL
3/8SWLL144147

TF-6320
SWL connection

TF-6320
Rc screwconnection

MASS FLOW METERMASS FLOW METER

TYPE

TYPE

FLOW

2-SWL

302-RcTOKYO KEISO CO.,LTD.
JAPAN

FLOW

30152(174)TOKYO KEISO CO.,LTD.
JAPAN152(174)GASFLOW RATEPRESSURE
MFG.NO.

GASFLOW RATEPRESSURE
MFG.NO.

2-M4DEPTH640
□6040
□60

2-M4DEPTH67070130

CONNECTION
Rc1/4
Rc3/8
Rc1/2

6

TOKYO KEISO CO., LTD.

3030130
L

CONNECTION
1/4SWL
3/8SWL
1/2SWL

L
181
184
188

TG-F2279-E01

TF-5000/6000 Series MASS FLOWMETER
TF-6330
SWLconnection

MASS FLOW METERTYPEGASFLOW RATEPRESSURE
MFG.NO.
TOKYO KEISO CO.,LTD.
JAPAN(194)TOKYO KEISO CO.,LTD.
JAPAN

FLOW

2-Rc

MASS FLOW METER

TYPE
GAS
FLOW RATEPRESSURE
MFG.NO.

(194)

TF-6330
Rc screwconnection

FLOW

40

40

2-SWL

100

6048

100

196

□80

2-M5DEPTH860□80

2-M5DEPTH848196
L

CONNECTION
Rc3/8
Rc1/2

CONNECTION
1/4SWL
3/8SWL
1/2SWL
3/4SWL

L
247
250
255
266

TF-6340
SWL
connection

TF-6340
Rc screwconnection
MASS FLOW METERMASS FLOW METER

TYPE

TYPE

GAS
FLOW RATEPRESSURE
MFG.NO.

GASFLOW RATEPRESSUREMFG.NO.

(194)

2-SWL

402-RcTOKYO KEISO CO.,LTD.
JAPANFLOW

14023660□80

2-M5DEPTH860□80

2-M5DEPTH840(194)TOKYO KEISO CO.,LTD.
JAPANFLOW

48140236
L48

CONNECTION

Rc3/8
Rc1/2

TG-F2279-E01

CONNECTION

3/8SWL
1/2SWL
3/4SWL

L
290295306

TOKYO KEISO CO., LTD.

7

TF-5000/6000 Series MASS FLOWMETER

EXAMPLE OF MODEL SELECTION
The flow range is indicated as that of N2 gas.
When measuring other gases, use the conversion factors (CF) shown below to convert the flow rate of the desired gas to that of N2 andconfirm that the selected model is appropriate for that measurement.
Formula for single-component gas
Flow rate of the gas specified by customers
Flow rate converted=to that of N 2
CF of the gas
Formula for mixed gas (gas with two or more components)
First, identify each CF of the component gases, calculate the CF of the mixed gas, and then convert its flow rate to that of N2.
CF of the mixed gas

=

1X1
X2
X6++…+
CF1
CF2
CF6

X1 ：Composition ratio of Component 1 (vol%/100)
X2 ：Composition ratio of Component 2 (vol%/100)⋮X6 ：Composition ratio of Component 6 (vol%/100)
CF1 ：CF of Component 1
CF2 ：CF of Component 2⋮
CF6 ：CF of Component 6
Flow rate of the mixed gas specified by customers
Flow rate converted=to that of N 2
CF of the mixed gas
CF of main gases
MolecularCFformulaNitrogen
N2
1.000
Air
AIR
1.001
Argon
Ar
1.2※aCarbon monoxide CO
0.998
Carbon dioxide※b CO20.745
HeliumHe
1.404
HydrogenH2
1.007
NeonNe1.403
Ammonia
NH 3
0.769
Nitric monoxide
NO0.976
FluidMolecularCFformulaNitrogen dioxide
NO20.740
Nitrogen monoxide N 2O0.714
OxygenO20.984
MethaneCH40.782
EthyleneC 2H40.623
EthaneC 2H 60.505
Propylene
C3H 60.407
PropaneC3H 80.351
n-butanen-C 4H10 0.266

Fluid※a：Use 1.4, not 1.2, for CF to convert the flow rate of Ar to that of N 2.
※b：Operating pressure is limited to 3 MPa at 30℃ or more for CO2（TF-6300 Series）.
Example: When the fluid is helium, the flow rate is 25 L/min (nor), pressure is 0.1 MPa, temperature is 20℃, and fitting is 1/4"SWL:Flow rate converted=
to that of N 2

25L/min（nor）
1.404（CF）=

17.8 L/min.(nor)Thus, TF-5310-253-S04 should be selected.

8TOKYO KEISO CO., LTD.

TG-F2279-E01

TF-5000/6000 Series MASS FLOWMETERCautions on use• The mass flowmeter outputs flow rate signals from 0% to 100%. If the value in the lowest digit fluctuates too much at the zero point, set thelow-cut at the converter. TM3000 (a dedicated converter) cuts off values of 2% or less as standard.
• When fluid flows in the opposite direction, the mass flowmeter outputs negative signals. To prevent this, install a check valve in the down
stream of the flowmeter.
• The flow rate output characteristic of the mass flowmeter has been set to 5.000 [V] at the full-scale flow rate. If the flow rate exceeds theupper limit, the output of the flowmeter rises linearly at first but then declines gradually. To prevent this, use the flowmeter within the rated flowrates.
• Stop the flow of gas completely before adjusting the zero point. For details, see the Instruction Manual.
• Never allow gases that corrode SUS316 to flow through the flowmeter because the sensor capillary is made of SUS316TP.

Cautions on installation• Since the sensor capillary has a small bore of ø0.3, it is easily blocked by dust and other foreign matter. Flush the piping thoroughly to remove
foreign matter and moisture before mounting the flowmeter.
• For ammonia, DME, and other liquescent gases, install a filter in the upstream of the flowmeter.
• To avoid electrical noise, use shielded lines. Do not place them alongside other power lines.
• The arrow on the main body shows the correct direction of the flow for measurement. Install the flowmeter so that the measuring gas flows inthis direction.
• The TF-6300 series (high-pressure type) must be installed horizontally.
• The TF-6300 series is used under high pressure, so the piping and the flowmeter may be cooled. To prevent measuring gases from liquefying, add insulation material or a tape heater on the piping or the flowmeter.
• The TF-5300 series and TF-6300 series do not need straight runs in both the upstream and downstream.

TG-F2279-E01

TOKYO KEISO CO., LTD.

9

TF-5000/6000 Series MASS FLOWMETERAPPLICATION EXAMPLES❏ Direct control by 0 to 5 V DC output❏ Indication, Totalization...
SC-FM3Cable

TM3000 CONVERTORMASS FLOW METERMASS FLOW METER

TYPE(0 to V5 DC
V DC(0–54 to 20mADC)
or 4–20mA
DC)

TYPE

GAS

GAS

FLOW RATEFLOW RATEPRESSURE

PRESSURE

MFG.NO.

MFG.NO.

TOKYO KEISO CO.,LTD.
JAPANTOKYO KEISO CO.,LTD.
JAPAN

TM3000Convertor UnitHigh or Low

SUPPORTING INSTRUMENTS❏ TM3000 convertor unit

*Refer to TM3000 catalog for details❏ Connecting cable
Code
SC-TF
SC-FM3Connection
Between the TF detector and thecommercially available power unit
(output: 0 to 5 V DC)
Between the TF detector and theTM3000 converter

Standard
lengthMax.
length2m

100m

2m100m* Specification is subject to change without notice.

Head Office : Shiba Toho Building, 1 – 7 – 24 Shibakoen, Minato-ku, Tokyo 105 – 8558
Tel : +81-3 – 3431 – 1625 (KEY) ; Fax : +81-3 – 3433 – 4922
e-mail : overseas.sales@tokyokeiso.co.jp ; URL : https://www.tokyokeiso.co.jp
10TG-F2279-E01