Standard type purgemeter for measuring gases andliquids in semiconductor production

P-820

Purgemeter

OUTLINE
Just like the popular P-810 model, the P-820 is also widely used in semiconductor production.
Models with reed switch type alarm contact are available.

MAJOR APPLICATIONSFlow measurement in semiconductor production equipment

STANDARD SPECIFICATIONS
Gases
Liquid (Equivalent to water：Density 1.0ｇ/ｃｍ 3, Viscosity 1.0mPa・s)

Measuring fluidAir

Measuring range

WaterP-821

Min. 0.5 to 5 mL/min（nor）
Max. 12 to 60 L/min（nor）

P-823

Min. 5 to 50 mL/min（nor）
Max. 6 to 60 L/min（nor）

P-821

Min. 5 to 50 mL/min
Max. 0.4 to 2 L/min

P-823/STANDARD FLOW RATE TABLE

P-823

Min. 5 to 50 mL/min
Max. 0.2 to 2 L/min

When the fluid pressure is other than 0 MPa, refer to Index & Quick Reference for P Series Purgemeters (TG-S0001).

・When selecting a flow range, refer to "Index & Quick Reference
for P Series Purgemeters" (TG-S0001).

For alarm output codes of 0 or E
Air (0ºC, 0 MPa)

Range ability

10：1 (10:2 for some models)

Indication accuracy

P-821 : ± 5％ F.S.
P-823 : ± 3％ F.S.

10 to 100 mL/min（nor）

Fluid pressure

Max. 0.8 MPa

Fluid temperature

Max. 120ºC（Depends on the gasket material）

30 to 300 mL/min（nor）

Material

GasketFluoro rubber (Max. 120ºC)
Chloroprene rubber (Max. 80ºC)
・The maximum fluid temperature for each gasket material mayvary depending on usage and ambient conditions.
Acrylic

Process Connection

Rc : 1/4"（Standard）, 1/8"
NPT : 1/4", 1/8"
SW : 1/4", 3/8"
VCR : 1/4", 3/8"

Mounting

Lock nut mount on the panel front (Standard)
Bezel mounting

Massapprox. 0.6ｋｇ (P-821)

P-823

○○

UL-approved○○○○

For CE approval, refer to Index & Quick Reference for P Series Purgemeters (TG-S0001).

P-821/STANDARD FLOW RATE TABLE
When the fluid pressure is other than 0 MPa, refer to Index & Quick Reference for P Series Purgemeters (TG-S0001).
Water

For alarm output codes of A to D
Air (0ºC, 0 MPa) Alarm setting range

Water

Alarm setting range

0.5 to 5 mL/min（nor）
1 to 10 mL/min（nor）
2 to 20 mL/min（nor）
3 to 30 mL/min（nor）
5 to 50 mL/min（nor）
10 to 100 mL/min（nor）
20 to 200 mL/min（nor）＊5
30 to 300 mL/min（nor）
50 to 500 mL/min（nor）
0.1 to 1 L/min（nor）
0.2 to 2 L/min（nor）

5 to 50 mL/min

0.3 to 3 L/min（nor）

10 to 100 mL/min

0.5 to 5 L/min（nor）

20 to 200 mL/min

1 to 10 L/min（nor）

30 to 300 mL/min

10 to 100 mL/min
20 to 200 mL/min

1 to 10 L/min（nor）

30 to 300 mL/min
100 to 400 mL/min

2 to 20 L/min（nor）

50 to 500 mL/min

1 to 10 L/min（nor）

2 to 8 L/min（nor）

3 to 30 L/min（nor）

0.1 to 1 L/min

2 to 20 L/min（nor）

4 to 16 L/min（nor）

5 to 50 L/min（nor）

0.15 to 1.5 L/min

3 to 30 L/min（nor） 6 to 24 L/min（nor）

6 to 60 L/min（nor）

0.2 to 2 L/min

5 to 50 L/min（nor） 10 to 40 L/min（nor） 0.15 to 1.5 L/min

0.1 to 1 L/min

0.2 to 0.8 L/min
0.3 to 1.2 L/min

Model CodeDescriptions
Notes□ — □ □ — □ □ — □ □1115mmFaceDifferent standard flow
to-face
3224mmrate tables are provided
dimension 9for each codeSpecial— 0Not provided— 1Bellows valve at the outlet Refer to "Index & Quick— 2
Bellows valve at the inlet Reference for P Series
Valve
— 3
Needle valve at the outlet Purgemeters" (TG— 4Needle valve at the inlet S0001).
— ZSpecial0
Not provided
A
Reed switch alarm (LO)
Refer to "Index & Quick
B
Reed switch alarm (LC)
Reference for P Series
Alarm output
C
Reed switch alarm (HO)
Purgemeters" (TGD
Reed switch alarm (HC)S0001).
E
PAU alarm unit provided
ZSpecial— 6
SCS14 (Standard)
SUS316（Electrolytically Selectable when theWetted parts material— Epolished）
connection type code isV＊— ZSpecial
F
Fluoro rubber (Standard)
Chloroprene rubber (CR)
Select this code for
Gasket material
Cammonia gas.
ZSpecial— RRc (Standard)
Bezel mounting isavailable.
— NNPT female
For details, refer to— SSW
Process connection type"Index & Quick— V
VCR (Male connector)
Reference for P SeriesSpecialPurgemeters" (TG— ZS0001).
Selectable when the
1 1/8"
connection type code is
R or N
2 1/4" (Standard)
Process connection size
Selectable when the3 3/8"
connection type code is
S or VZ SpecialP-82

GeneralFor alarm output codes of 0 or E

5 to 50 mL/min

0.3 to 3 L/min（nor）
0.5 to 5 L/min（nor）

BASIC MODEL CODE

P-821

PAU optical alarm unit

0.2 to 2 L/min（nor）

Although other flow rate specifications are available, some flow ranges need to be changed. Contact
us for details.

Availability

TypeAir (0ºC, 0 MPa)

50 to 500 mL/min

0.1 to 1 L/min（nor）

ALARM CONTACT AND OUTPUT
Reed switch type alarm unit

Alarm setting range

50 to 500 mL/min（nor）

SCS14（Standard）, SUS316（Electrolytically polished）
Heat-resistant glass

SPCC or C2801P

Water20 to 200 mL/min（nor）

Tapered tube

CoverFor alarm output codes of A to D
Air (0ºC, 0 MPa) Alarm setting range

5 to 50 mL/min（nor）

Wetted part

Mounting plate

Water

2 to 20 L/min（nor）

50 to 500 mL/min

3 to 30 L/min（nor）＊1

0.1 to 1 L/min ＊2

1 to 10 L/min（nor）＊3 2 to 8 L/min（nor）
3 to 15 L/min（nor）

3 to 12 L/min（nor） 50 to 500 mL/min 100 to 400 mL/min

10 to 50 L/min（nor）

0.3 to 1.5 L/min

6 to 30 L/min（nor）

6 to 24 L/min（nor） 0.1 to 1 L/min ＊4 0.2 to 0.8 L/min

12 to 60 L/min（nor）

0.4 to 2 L/min

10 to 50 L/min（nor） 10 to 40 L/min（nor）0.3 to 1.5 L/min

0.3 to 1.2 L/min

Although other flow rate specifications are available, some flow ranges need to be changed. Contact
us for details.
＊ 1 10:2 when the range is more than 30 L/min (nor).
＊ 2 10:2 when the range is more than 1 L/min.
＊ 3 10:2 when the range is more than 10 L/min (nor).
＊ 4 10:2 when the range is more than 1 L/min.
＊ 5 For models with a flow rate range of less than 160 mL/min (nor), the alarm output code of E
cannot be specified.

＊ When connection type code V is not selected, the fitting parts cannot
be electrolytically polished.

OTHER AVAILABLE OPTIONS
You can specify the following options:Two-point alarm, length of reed switch lead wire, double graduations, special graduations,built-in rubber fitting type, various fitting types, etc.
For details, refer to Index & Quick Reference for P Series Purgemeters (TG-S0001).

TG-F2414-E01
2nd edition Jun 2024 K
1st edition Sep 2023 K

P-820Purgemeter

ORDERING INFORMATION
Basic model codeＰ-82 □ - □□ - □□ - □□Items to be specified①②③④⑤
Fluid name − Flow range − Press. − Temp. − Mounting option（Select in the model code table.）−⑥Other options（Refer to Index & Quick Reference for P Series Purgemeters (TG-S0001).）

DIMENSIONS● Standard typeP － 82 □－ 40 － 6F － R2

● Standard typeP-82 □－ 30 － 6F － S2

■ Lock nut mounting on the panel front■ Valve at the inlet (needle valve)■ Lock nut mounting on the panel front■ Valve at the outlet (needle valve)Panel2-φ16

Panel cutPanel cut● Bezel mounting typeP － 82 □－ 30 －□□－□□

Dimension table■ Bezel mounting (Mounting option code: D)■ Valve at the outlet (needle valve)Model

For 4-M4(Countersink)

P-821
P-823

L1143
252

L2115
224

Dimension (mm)
L3
L4
145
160
254
265

L5175280● Standard material

Panel

Panel cutPanel cut size
Connection size
Rc1/8, 1/8NPT
Rc1/4, 1/4NPT
1/4SW
3/8SW
1/4VCR
3/8VCR

Diameter (d) (mm)16221622
22
32

Rear length L (mm)
（22）
（22）
（29.5）（31.5）（30）（35.5）

Note: Use non-magnetic material for the panel when the alarm output
code is one of A to D.

Parts nameStandard material
Available materialBody○ SCS14SUS316
Tapered○ Heat-resistant glass−tube−
Float ＊ 1 ○ SUS316, Glass, Ruby, Carbon
Packing ○ Fluoro rubber
Chloroprene rubber (CR)Spindle○ SUS316−
Fitting○ SUS316−
Valve○ SUS316−
Mounting
SPCC, C2801P−
plate ＊ 2
CoverAcryl−
Parts marked“○”come in contact with the measuring fluid.

＊ 1 We will select a proper material for your application.
＊ 2 C2801P is used when the alarm output code is one of A to D.

· SUS316 may be used instead of SUS304 due to production reasons.
· ASTM or AISI materials equivalent to JIS materials may be used due toproduction reasons.

* Specification is subject to change without notice.

Head Office : Shiba Toho Building, 1 – 7 – 24 Shibakoen, Minato-ku, Tokyo 105 – 8558
Tel : +81-3 – 3431 – 1625 (KEY) ; Fax : +81-3 – 3433 – 4922
e-mail : overseas.sales@tokyokeiso.co.jp ; URL : https://www.tokyokeiso.co.jp
2TOKYO KEISO CO., LTD.

TG-F2414-E01