Circumferentially sealed, low-leakage purgemeter formeasuring gases and liquids

P-810

Purgemeter
OUTLINE
The P-810 is ideal for measuring the flow rates of various gases insemiconductor production. High reliability is ensured by circumferential seals.
The P-810 has a solid track record in applications with various devices.
Electrolytically polished models with low leakage are also available.

MAJOR APPLICATIONS
Gas flow measurement in semiconductor production equipment,
especially for low-leakage lines

STANDARD SPECIFICATIONS
Gases
Liquid (Equivalent to water：Density 1.0ｇ/ｃｍ 3,
Viscosity 1.0mPa・s)
Min. 5 to 50 mL/min（nor）
Air
Max. 6 to 60 L/min（nor）
Min. 5 to 50 mL/min
Water
Measuring range
Max. 0.2 to 2 L/min・When selecting a flow range, refer to "Index &Quick Reference for P Series Purgemeters"(TG-S0001).
Range ability
10：1
Indication accuracy± 3％ F.S.
Fluid pressure
Max. 0.8 MPa
Fluid temperature
Max. 120ºC（Depends on the gasket material）
Wetted part SCS14（Standard）, SUS316（Electrolytically polished）
Tapered tube Heat-resistant glass
Fluoro rubber (Max. 120ºC)
Chloroprene rubber (Max. 80ºC)
・The maximum fluid temperature for each
Material Gasket
gasket material may vary depending on usage
and ambient conditions.
Mounting plate SUS304
CoverTransparent PVC
Rc : 1/4"（Standard）, 1/8"
NPT : 1/4", 1/8"
Process Connection
SW : 1/4", 3/8"
VCR : 1/4", 3/8"
Lock nut mount on the panel front (Standard)
Mounting
Bezel mounting
Massapprox. 0.6ｋｇ
Measuring fluid

BASIC MODEL CODE
Model CodeP-81
Faceto-facedimension

3GeneralUL-approved
PAU optical alarm unit

Reed switch type alarm unit

Availability××○Not provided— 1

Bellows valve at theoutlet— 2

Bellows valve at theinlet— 3

Needle valve at theoutlet— 4

Needle valve at theinlet

Valve— ZAlarm output

Not provided

EPAU alarm unit
providedZ

Wetted parts material

Special— 6

SCS14 (Standard)— E

SUS316（Electrolyticallypolished）— Z

Gasket material

Process connection type

to 1
to 2
to 3
to 5
to 10
to 20
to 30
to 50
to 60

L/min（nor）
L/min（nor）
L/min（nor）
L/min（nor）
L/min（nor）
L/min（nor）
L/min（nor）
L/min（nor）
L/min（nor）

5102030
500.1
0.15
0.2

Selectable when theconnection type code is V＊SpecialFFluoro rubber(Standard)

C

Chloroprene rubber(CR)ZSpecial— RRc (Standard)— N

NPT female— SSW— VVCR (Male connector)— Z

SpecialBezel mounting is available.
For details, refer to "Index& Quick Reference for P
Series Purgemeters" (TGS0001).
Selectable when theconnection type code is R
or N

1 1/8"
Process connection size

Select this code forammonia gas.

2 1/4" (Standard)
3 3/8"

Selectable when theconnection type code is S
or VZ Specialbe electrolytically polished.

When the fluid pressure is other than 0 MPa, refer to "Index & Quick Reference for P Series
Purgemeters" (TG-S0001).

0.1
0.2
0.3
0.5
12356

Refer to "Index & Quick
Reference for P Series
Purgemeters" (TG-S0001).

＊ W hen connection type code V is not selected, the fitting parts cannot

STANDARD FLOW RATE TABLE

510203050

Refer to "Index & Quick
Reference for P Series
Purgemeters" (TG-S0001).

Special0For CE approval, refer to "Index & Quick Reference for P Series Purgemeters" (TG-S0001).

For alarm output codes of 0 or E
Air (0ºC, 0 MPa)
to 50 mL/min（nor）  to 100 mL/min（nor）
to 200 mL/min（nor）
to 300 mL/min（nor）
to 500 mL/min
（nor）

Notes

Standard (224mm)— 0ALARM CONTACT AND OUTPUT
TypeDescriptions

3 — □ □ — □ □ — □ □Water

OTHER AVAILABLE OPTIONS
You can specify the following options:Double graduations, special graduations, with/without a stand, built-in
rubber fitting type, various fitting types, etc.
For details, refer to "Index & Quick Reference for P Series Purgemeters"(TG-S0001).

to 50 mL/minto 100 mL/min
to 200 mL/min
to 300 mL/min
to 500 mL/min
to 1L/minto 1.5 L/min
to 2L/min

Although other flow rate specifications are available, some flow ranges need to bechanged. Contact us for details.

TG-F2412-E01
2nd edition Jun 2024 K
1st edition Sep 2023 K

P-810Purgemeter

ORDERING INFORMATION
Basic model code
Ｐ-813- □□ - □□ - □□Items to be specified①②③④⑤⑥
Fluid name − Flow range − Press. − Temp. − Mounting option − Other options（Select in the model code table.）（Refer to "Index & Quick Reference for P Series Purgemeters" (TG-S0001).）

DIMENSIONS● Standard typeP － 813 － 10 － 6F － R2

● Standard typeP － 813 － 40 － 6F － S2

■ Lock nut mounting on the panel front■ Valve at the outlet (bellows valve)● Bezel mounting typeP － 813 － 00 － 6F － S2

■ Lock nut mounting on the panel front■ Valve at the inlet (needle valve)

Panel cutPanel cut

Dimension table■ Bezel mounting (Mounting option code: D)■ Without a valve

ModelPanel

For 4-M4(Countersink)

L1249

P-813

L2224

Dimension (mm)L3L4254265

L5280● Standard material

NutFerrule
Welding

Panel cutPanel cut size
Connection size
Rc1/8,1/8NPT
Rc1/4,1/4NPT
1/4 SW
3/8 SW
1/4 VCR
3/8 VCR

Diameter (d) (mm)1622
16222232

Rear length L (mm)（20.5）（20.5）
（28）
（30）
（30）
（34.5）

Parts nameStandard material
Body○ SCS14Tapered○ Heat-resistant glass
tube○ SUS316, Glass, Ruby
Float ＊Packing○ Fluoro rubber
Packing○ SUS316
pressFitting○ SUS316
Valve○ SUS316
Mounting
SUS304plateCoverTransparent PVCAvailable material
SUS316−−Chloroprene rubber (CR)−−−−−

Parts marked“○”come in contact with the measuring fluid.
＊ We will select a proper material for your application.
· SUS316 may be used instead of SUS304 due to production reasons.
· ASTM or AISI materials equivalent to JIS materials may be used due toproduction reasons.

* Specification is subject to change without notice.

Head Office : Shiba Toho Building, 1 – 7 – 24 Shibakoen, Minato-ku, Tokyo 105 – 8558
Tel : +81-3 – 3431 – 1625 (KEY) ; Fax : +81-3 – 3433 – 4922
e-mail : overseas.sales@tokyokeiso.co.jp ; URL : https://www.tokyokeiso.co.jp
2

TOKYO KEISO CO., LTD.

TG-F2412-E01