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About ULVAC

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About ULVACULVAC’s Vision

ULVAC’s Strategy

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Financial Data/Corporate Information

ULVAC’s History
Ever since its foundation in 1952, ULVAC has been contributing to the resolution of social issues in eachsuccessive era by deploying its core state-of-the-art vacuum technology, and has grown remarkably. ULVAC willcontinue contributing to the development of industry and science through the comprehensive application ofvacuum technology in accordance with the Basic Corporate Philosophy.

Customers’ products

Industrial restoration and convenience in daily life
Applied vacuum equipment to contribute to industries supporting
people’s lives

1952 Japan Vacuum Engineering Co., Ltd. was founded.
1955 Opened the Omori Plant in Tokyo to start manufacturing equipment in Japan.
1959 Opened the Yokohama Plant.
1964 Established the first overseas subsidiary in Hong Kong.
1968 Head Office/Plant completed in Chigasaki, Kanagawa Prefecture.

Used in the late 1950s

Established in 1963

Contribution to resolution of social issues
Developed vacuum arc furnaces for stainless steel and other steel
manufacturers, contributing to industrial restoration.
Developed vacuum melting and casting furnace for nuclear power development,contributing to the solution of energy problems.
Developed highly sensitive vacuum gas analysis for direct analysis of air pollution.
Delivered a large-scale space chamber to the space research lab at theUniversity of Tokyo, contributing to space development.
Developed vacuum freeze-drying equipment for instant foods, contributing tothe improvement of food culture.

Minor change in 1983

Reflectors for automobiles

Comfortable working environment

1972 Opened the Institute for Super Materials as ULVAC’s first research facility.
1975 Established a subsidiary in North America as a base for exports to the U.S.
1982 Established a subsidiary in Taiwan.
1983 Opened the Beijing Office in China.
1990 Opened the Fuji Susono Plant in Shizuoka Prefecture, as a plant dedicated tosemiconductor production equipment.

Results for FY 2022

Ratio ofsales
overseas:
Operatingprofit¥19.9

Contribution to resolution of social issues
Delivered vacuum pumping system for a critical plasma tester to Japan Atomic
Energy Research Institute.
Developed transparent conductive film deposition equipment for LCDs for calculators.
Developed the world’s first multi-chamber deposition system for semiconductor
memory.
Delivered the world’s first computer-controlled vacuum deposition system forsemiconductors to IBM.
Developed sputtering equipment for hard disk deposition, making a significant
contribution to improvement of computer performance.

billion66%

Special steel

100 kg-class induction heat-type
vacuum melting furnace

LCD calculator display

Transparent conductive film
deposition equipment

Computer (Photo:
Courtesy of IBM Archives)

1991-2010 Information society, spread of digital home appliances

billionULVAC grew significantly in line with the expansion of the FPD market
from Japan to South Korea and Taiwan.

Contribution to resolution of social issues
Developed the CERAUS series of multi-chamber deposition systems for semiconductors.
Developed the SMD series of sputtering systems for LCDs, contributing tomass production of laptop PCs. It subsequently became the foundation for thepopularization of flat-screen TVs.
Developed deposition equipment for OLED, which is a next-generation display.
Developed ion implantation system for mass production of power devices that
contribute to power saving.
Developed the ECO-SHOCK power-saving attachment for dry pumps.
Developed an integrated production line for thin-film solar cells to meet thedemand for renewable energy.

Sales overseas*

Operating profit*

Disks/discs (magnetic,optical)

In-line sputtering equipment
for magnetic disks

Flat-panel display

LCD production equipment

Large flat-panel display

LCD production equipment

Electronic devices

Electronic device
production equipment

Advanced semiconductor

Semiconductor production
equipment

2011-Present Digital society*Sales overseas and operating profit only for FY 2004 onward areindicated.

Sustainable future

Contributing to a wide range of fields by leveraging strengths as acomprehensive vacuum equipment manufacturer in line with the spreadof mobile devices and the development of ICT

1952

Head Office at the timeof establishment (1952)

1319601970

Head Office/Plant completed in Chigasaki(1968)ULVAC VALUE REPORT 2023

Fully automated vacuum
evaporation equipment

High-performance devices

2001 Changed the company name to ULVAC, Inc.
2003 Established a full-scale production and service base in China.
2004 Listed on the First Section of the Tokyo Stock Exchange. New buildings ofthe Head Office/Plant (Chigasaki) completed.
2005 Opened the Chiba Tomisato Plant for the development and manufacturing of materials.

Net sales

High-vacuum
distillationequipment forplasticizers

Pharmaceuticals

In line with increasing demand for semiconductors, a stream of ULVAC
products gained top shares in the global market.

¥227.5

Vacuum evaporation equipment
for general industries

1971-1990 Development of electronics

The current logo was established in 2001.

Net sales:

ULVAC’s solutions

1952-1970 High economic growth period

1980

Institute for Super Materials(1972)

1990

2000

Fuji Susono Plant (1990)20102020 2022 (FY)

Listed on the First Section of theTokyo Stock Exchange (2004)

2011 Established the South Korea Institute for Super Materials in South Korea.
2015 Established the Future Technology Research Laboratory.
2018 Opened the ULVAC-Osaka University Joint Research Laboratory for Future
Technology at Osaka University.
2021 Opened the ULVAC Advanced Technology Collaborative Research Cluster at
Tokyo Institute of Technology.
2022 Listed on the Prime Market of the Tokyo Stock Exchange.
Contribution to resolution of social issues
Development of thin-film lithium metal anode using vacuum deposition technology
was selected for the NEDO* Green Innovation Fund Project “Development of NextGeneration Storage Batteries and Next-Generation Motors”
The ULVAC-Osaka University Joint Research Laboratory for Future Technology atOsaka University is conducting basic research in the regenerative medicine andenergy fields and accepts students for Japan’s first corporate co-creation program.
The ULVAC Advanced Technology Collaborative Research Cluster at Tokyo Instituteof Technology aims at co-creation, such as human resources development andintegration of plasma diagnostics technology and AI technology.
Developed extreme ultraviolet (EUV) lithography-ready sputtering equipment forMetal Hard Mask (MHM) process, contributing to mass production of highspeed, low-power-consumption advanced logic devices.
* New Energy and Industrial Technology Development Organization

OLED production
equipment
OLEDULVAC VALUE REPORT 202314