Worldwide R&D

Laboratory of Advanced Science and Technology for Industry
Tadashi Hattori, Professor, Himeji Institute of Technology
1. Introduction

3. Department of Micro Systems

Various research departments have been gradually
added at the Laboratory of Advanced Science andTechnology for Industry at Himeji Institute of Technology
after construction of the laboratory in April 1994.
Currently advanced research is being conducted underfive standard departments and one special department for
visiting researchers. The Department of Micro Systems
came to be in February 2000 after I joined the university.
Along with other staff in the department, including
associate professor Yuichi Utsumi and research associate
Harutaka Mekaru, I am currently conducting research on
microsystems through active use of the synchrotron
radiation facility New SUBARU built in the laboratory.

Studies on the LIGA process are conducted at nearly
every research institute having a radiation facility.
However, few links have been made to industrial
applications as of yet, even though such research has been
conducted for more than twenty years. Recent trends inresearch on LIGA processes can probably be classified
under the following three categories.
(1) Studies on producing structures with a high-aspectratio (height/width) using high-energy soft X-rays(2) Studies on producing 3D structures(3) Advanced and practical studies on electroforming and molding
processes important in post-lithography manufacturing
America and Europe in particular emphasize (1) above
because a high aspect ratio increases the specific surface areaof the structure, providing various advances in functionality.
However, (2) and (3) are more important for making realistic
advances in industrial applications. In effect, we are striving
to create 3D microstructures of desired shapes using LIGA,
which can only create simple, cookie-cutter shapes, while
reducing production costs and expanding material selections.
Through our effective policy designed to establish allprocesses, from developing an X-ray mask to massproduction of molds, we have succeeded in developing
optical switches for broadband applications, optical devices
for terminals, chips for bioanalysis, and essential components
for various microsystems. While there are still a mountain ofissues to overcome before we can achieve our goal of being
the first to produce microfunctional structures having a
dynamic range from nanometers to microns, we are moving
forward one day at a time toward establishing a single base inJapan for radiation manufacturing.
If you are fortunate to have the time and means totake a trip, please visit us at the West Harima ScienceGarden City. Take a break from your everyday activities
and tour the New SUBARU and SPring-8 facilities.

2. New SUBARU Synchrotron Radiation
Facility at Himeji Institute of Technology
The synchrotron radiation facility New SUBARU was
put in-service in January 2000. The facility, which is thethird largest of its kind in Japan, is primarily intended tohelp establish a new industrial technology foundation
through advanced research focusing on optics anddevelopment in cooperation with businesses. Financiallysupported by the local government of Hyogo Prefecture,New SUBARU is housed within the same complex as
SPring-8, the world's brightest synchrotron radiation
facility. But while the two facilities have an impact oneach another, New SUBARU is a unique facility both
domestically and overseas for the fields of soft X-rays andvacuum ultraviolet light sources in the strong emphasis it
places on industrial use.
Already seven beam lines are currently in use. Fig. 1
shows the overall layout of the facilities. The storage ringhas a circumference of 119 meters, a beam energy of 1.5
GeV, and a stored current of 500 mA. Beam line 11 (BL11)
is dedicated to microsystem processing and is used toperform deep X-ray lithography in the LIGA process.

SPring-8
LINAC
Long Undulator
Short
Undulator

Optical KlystronFree-Electron Laser
Control room (2F)

Clean room

Super Conducting
WigglerFig. 1 The synchrotron radiation facility New SUBARU

Fig. 2 PMMA exposure pattern

MICROMACHINE No. 42
MICROMACHINE is published quarterly by Micromachine Center (MMC) to promote the international exchange ofinformation related to micromachines, R&D and other technical topics, and is circulated free of change. Please send
your comments about MICROMACHINE to the publisher :Takayuki Hirano, Executive Director, Micromachine Center (MMC)
MBR99 Bldg., 6F., 67 Kanda Sakumagashi, Chiyoda-ku, Tokyo 101-0026, Japan
Tel : +81-3-5835-1870, Fax : +81-3-5835-1873
Internet Home Page h t t p : / / w w w . m m c . o r . j p /Date of Issue : February 14, 2003© All Copyrights Reserved by MMC