Toward the Achievement of 3rd Generation MEMS: Bio & Electro-mechanicalAutonomous Nano Systems (BEANS)
Keiichi Aoyanagi, Executive Director, Micromachine Center
However, in order to respond to the future needs of theautomobile, information and telecommunications, safety andsecurity, environment, medical care and other fields, second
generation multifunctional MEMS devices (fine MEMS) that areultra-compact and offer advanced functions and high reliability will
be needed. For this reason, a three-year fine MEMS technicaldevelopment project was initiated in fiscal 2006. The purpose ofthis project was to support the development of these second
generation fine MEMS devices through research into (1) complex
technologies to implement nanofunctions, (2) integrated
construction with semiconductor chips, and (3) methods toconnect MEMS components in a highly integrated manner.
Practical application of fine MEMS technologies is expected in fiveto ten years.

MEMS: The “Beans” of Industry
In recent years, Micro Electro Mechanical Systems (MEMS)
have become a key part of industry. These devices areincorporated into a wide variety of final products and provide
high added value. Examples of development efforts andproducts include mirror devices for optical switches used in thefield of optical communications and so on, cantilevers used in
atomic force microscopes, pressure sensors and acceleration
sensors used in automobile components and the like, and radio
frequency (RF) MEMS switches used in wireless communication
systems.
In Japanese, the expression sangyo no kome (literally “therice of industry”) is used to indicate a key element of industry,
such as steel manufacture during Japan’s period of rapid
economic growth or the semiconductor chips that are now coredevices used in many products. MEMS devices have been called
not the rice but the “beans” of industry. This is because,
although tiny, MEMS are a source of vitality and provide
outstanding utility and functions to the products in which they
are incorporated.
The beans metaphor is applicable in other ways as well.
There are many different types of beans (soybeans, adzukibeans, peanuts, green beans etc.), and they are used to makemany bean products (natto, miso, tofu, soy milk, adzuki beanpaste etc.). Similarly, there are many different types of MEMS
devices, and they are used in many different types of products.

Expectations for BEANS (technologies of thefuture that will create new lifestyles)
MEMS technologies hold great promise for the society of thefuture 20 years from now. In order to realize this promise, further
advances in MEMS technology are needed, as well as the fusion ofthis technology with nanotech materials technology andbiotechnology to create third generation MEMS (future devices on
the frontier of MEMS research) that will create new lifestyles andhave a revolutionary impact on society. Efforts must be made now
to establish the technical infrastructure that will enable thecreation of these future devices. Accordingly, based on the resultsof a study conducted by the Micromachine Center (MMC) at thebehest of the Mechanical Social Systems Foundation, MMC has
called for a project to develop the technical infrastructure to fusenanotechnology and biotechnology with electrical and mechanicalsystems, in order to create autonomous devices and systems called
Bio Electro-Mechanical Autonomous Nano Systems (or BEANS).
With the support of the Council on Competitiveness Nippon(COCN), MMC is asking relevant parties to help make this anational / NEDO project beginning in fiscal 2008.

Development of MEMS
The first generation single-functional MEMS devices – thoseused primarily to replace existing single-function components dueto their compact size – are currently in development. These
products constitute an enormous market and include pressures
sensors, acceleration sensors, inkjet printer heads and so on. These
first generation MEMS devices constitute most of the domestic
market that is estimated at JPY 440 billion yen.
Industrial advancement(technical development and market expansion)

BEANS

Bio & Electro-mechanical Autonomous Nano Systems

A device system that integrates nano, bio and electrical equipment to enable autonomous decentralized operation
2.4 trillion yen(2015)

Third Generation BEANS: Creation of New Lifestyles– Fusing of Micro + Nano-bio– Key Devices for Autonomous Decentralized Systems

Green Devices: Environment / Energy
White Devices: Health / Medical Care
Blue Devices: Comfortable Living Environment

1.17 trillion yen(2010)

Second Generation– MEMS / nanotech function composite technologies
Fine MEMS– Technologies for integrated formation ofCreation of Multifunctional Devices
MEMS / semiconductors(advanced functions / miniaturization– MEMS / MEMS large-scale integration technologies/ reliability)

440 billion yen(2005)

BirthFirst Generation
Present Single-function devices: substituted for existing components(downsizing of existing devices)
MEMS
2005
2010
2015

of– Centered on 3-dimensional microprocessing
MEMS originally produced in Japanare developed both in-house and at foundries

2020

2025

MEMS Industry & MEMS Technology Road Map– Since 2000, the MEMS market in Japan has grown rapidly, reaching JPY 440 billion yen in 2005. In 2010, this market is expected toincrease to 1.17 trillion yen, and in 2015 it is expected to reach 2.4 trillion yen.*– In order to achieve further expansion, application to not only the existing major fields of automobile and information/telecommunications but
also to the fields of medical treatment and social welfare, biotechnology, environmental science and energy will be essential.
JPY 100
million yen

Predicted trends in the MEMS market (intermediate values)*

25000
20000
15000
10000
5000
0

Fiscal 2005

Fiscal 2010

Fiscal 2015

Agriculture, forestry and fisheries
Aerospace
Urban environmental management
Environment
EnergyBiotechnology
Medical / welfare
Manufacturing technology
Precision equipment
Entertainment
Consumer electrical / electronic equipment
Information and telecommunications equipment
Automobile

JPY 100 Markets expected to grow as a result of BEANS*
million yen
1600

Agriculture, forestry and fisheries

1400

Aerospace

1200
Urban environmental management

1000
800

Environment

600

Energy400

Biotechnology

200

Medical / welfare

0 Fiscal 2005 Fiscal 2010 Fiscal 2015
*From a market survey by the Micromachine Center

MEMS Market Trends

3