Inherited
ULVAC-StyleULVAC’s Strategy

Message to OurReaders

About ULVACULVAC’s Vision

ULVAC’s Strategy

Corporate
Governance

Financial Data/
Corporate Information

Promotion of Creation and Co-creation of Innovation
with Vacuum Technology as the Core
Development Policy

R&D Structure

We are promoting innovative research and development focused on vacuum technology,
with the ultimate objective of realizing a sustainable society. In view of recent investmentin the development of advanced semiconductors and electronic devices around theworld, we have decided to take on the challenge under a new structure geared to cocreation with customers. Spearheading our initiatives is the Research & Development
HQ, a new organization established in July 2023. Consist of three organizations, theInstitute of Advanced Technology, Future Technology Research Laboratory, and Software
Development Department, the Research & Development HQ promotes R&D of the entire
ULVAC Group to maximize R&D resources and results. For this purpose, the Research& Development HQ collaborates with other divisions and group companies to plan,
formulate, and promote development strategies.

Strengthening of the R&D Strategy
In the semiconductor and electronic device fields, which are our priority fields, we have reallocated resources.
The R&D Center will conduct next-generation product development and basic R&D to acquire basic IP, while theTechnology Center will swiftly promote product and technology development by deepening collaboration withcustomers and provide technical support. By enabling development meeting the needs of each product and region,
this new structure will maximize development outcomes.

Junya Kiyota

Senior Executive Officer
Research &Development HQ

R&D Investment Policy
Our aim is to strengthen the three semiconductor fields that will be growth drivers: logic, memory, and powerdevices. In the logic and memory fields, based on our experience with metal hard mask processes in the cutting-edge
logic field, we are developing equipment that will enable our entry into other processes and we are also improving theperformance of deposition processes. In the memory field, in line with the progress of miniaturization and ever-higherintegration, we are developing equipment for DRAM and 3D NAND flash memory with the aim of entering otherprocesses, while also developing deposition processes. In the power device field, which is attracting attention in viewof its potential contribution to energy saving, we are emphasizing the development of ion implantation systems.
In the logic and memory fields, the complexity of manufacturing technology is rapidly increasing. Therefore, inorder to succeed in the market, it is essential to collaborate ever-more closely with manufacturers of advanced
semiconductors. Against this backdrop, construction of Technology Center PYEONGTAEK is underway (scheduled forcompletion in March 2024) to further
strengthen ULVAC’s foundation for
R&D Investment Trends (3-year total) (Billions of yen)further development in South Korea.
75.0
The Technology Center’s mission isR&D capital investment
R&D cost
to accelerate product and technology> Semiconductors: more than40%
57.9
development near customers andLogic and Memory
35.2
enhance collaboration and technical(Sputtering for MHM and wiring process)44.6
support.
> Electronics: more than 20%

32.5

30.9
25.4
17.3

8.1
20112013

Power Devices(Ion Implanter, Sputtering, Etching, etc.)

25.7

18.8

12.1
20142016> FPDs : mid-10%

39.8
18.9

20172019

Battery (Evaporation)

25.4> Others: more than 20%
20202022

20232025(Plan)(FY)

Overview of Technology Center Pyeongtaek

Integration of the Group’s R&D functions
By integrating the R&D structure of
the entire Group, we aim to continuallycreate differentiated products andnew technologies, acquire IP, andaccelerate development. In this way,
we will establish and operate a systemthat will continue to provide cuttingedge products and technologies
in a timely manner in response tocustomer requirements. The Research& Development HQ will play a central
role in releasing advanced technologies
that enable us to quickly address social
issues for the benefit of society.

ATI China-Technology Center Suzhou

ATI Korea-Technology Center Pyeongtaek

Institute of Advanced Technology(ATI)-R&D Center Chigasaki-R&D Center Susono-R&D Center Tomisato

ATI Taiwan-Technology Center Zhubei

20%
2%
17%

ATI America

61%-Technology Center Boston

Semiconductor and electronic devices
FPD
Materials
Fundamental technologies**Fundamental technologies include software.

Green Innovation
Large quantities of greenhouse gas (GHG) emissions, which are a consequence of the development of the global
economy, are causing global warming. In order to solve this major environmental problem, developed countries
have declared their intention of achieving carbon neutrality and are implementing various greening measures. Inparticular, with CO2 emissions from the use of automobiles currently accounting for 16% of global GHG emissions,the trend toward electrification of automobiles is accelerating. However, due to the constraints on car body designand considering the cost, more compact and lightweight storage batteries are needed to spur mass adoption ofelectric vehicles. ULVAC will capitalize on its prowess in vacuum technology in the development of new technologies
for the manufacture of compact and lightweight storage batteries, thus creating innovation leading to resolution ofsocial issues. Specifically, we are developing production technology for lithium metal anodes by applying vacuum
technology to achieve social implementation of high-energy density storage batteries with lithium metal anodes. In
collaboration with manufacturers of parts and materials, film processors, etc., applying the deposition technology ofroll-to-roll vacuum lithium evaporation equipment for mass production, we will offer equipment capable of producing
thin-film, high-purity lithium anodes at low cost, thereby contributing to realization of more compact, higher-capacity
storage batteries and reducing
By changing the anode from graphite to Li, the conventional manufacturing processes of mixing, drying, and pressing
GHG emissions. ULVAC’s lithium
are no longer necessary, and a 73% reduction in GHG emissions can be expected.
Since the Li anode manufacturing process is electrified, fossil fuels are not required.
metal anode production technology
GHG emissions
was adopted by the NewMixing
CoatingDryingPressing(t-CO /GWh)
Energy and Industrial Technology
Graphite-based
active materials
Development Organization (NEDO)
BinderConductivityGraphiteadditive
11,200 *1
as a “development of material
based
Hot air drying furnaceanodetechnologies for next-generation
73%
storage batteries” theme in thereduction
area of R&D of “high-performancestorage batteries and materials”
2,970 *2
Li
*Calculated by annual
anode
under the “Next-generation Storage
electricity consumption
Li material
Li material
0.00047t-CO /kWh
Battery and Motor Development”*1 Source: “EU Competitiveness in Advanced Li-ion Batteries for E-Mobility and Stationary Storage Applications –project of the Green Innovation Fund
Opportunities and Actions,” 2017
Projects.
*2 Substitute value for emission factor by electric utility operator (for calculation of GHG emissions of specified emitters)
2Location:
Construction began:
Construction scheduled
to be completed:
Site area:
Building area:
Investment amount:

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ULVAC VALUE REPORT 2023

1029, Yulbuk-ri, Cheongbuk-eup,
Peyongtaek-si, Gyeonggi-do
March 2023
March 2024
Approximately 11,550 square meters
Approximately 13,168 square
meters (including clean room area ofapproximately 2,008 square meters)
Approximately 6 billion yen

2

ULVAC VALUE REPORT 2023

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Inherited
ULVAC-StyleULVAC’s Strategy

Message to Our
Readers

About ULVACULVAC’s Vision

ULVAC’s Strategy

Corporate
Governance

Financial Data/
Corporate Information

Promotion of Creation and Co-creation of Innovation
with Vacuum Technology as the CoreULVAC-Osaka University Joint Research Laboratory for Future Technology

Intellectual Property Assets

ULVAC, Inc. established ULVAC-Osaka University Joint Research Laboratory for Future Technology within Osaka
University and is promoting the following studies through industry-academia co-creation with the aim of creating
innovation.

As a pioneer of vacuum technology in Japan, the ULVAC Group has accumulated intellectual property rights andknowhow in many vacuum-related fields over the past 70 years. The vacuum-related intellectual property assets
accumulated within ULVAC, ranging from technologies for equipment, such as vacuum freeze-drying equipment forpharmaceutical applications and semiconductor manufacturing equipment to materials technologies, are expected tobe applied to new technologies in the future. With vacuum technology at its core, the ULVAC Group will continue tocreate and utilize intellectual property assets for the advancement of industry and science.

Development of Next-generation Semiconductor

Innovative semiconductor technologies are expected to constitute the foundation of the future information society.
Research is underway around the world into photoelectric fusion device, the next-generation optical semiconductor
devices expected to enable high-speed communication and low power consumption. The ULVAC-Osaka University
Joint Research Laboratory for Future Technology is researching photonics-spin convergence semiconductor devices,which are photoelectric fusion device that exploit the degree of freedom of spin of electrons. This technology has
the potential to transcend the issues constraining development current semiconductor devices, such as the processscaling limit and heat generation, to achieve higher information density. ULVAC also aims to create new processes
and materials facilitating application of advanced vacuum deposition technology in the semiconductor industry.

Basic Policy on Intellectual Property Assets
The basic policy on intellectual property assets is“to develop and enhance the business environment,
strengthen the competitiveness of the entire
ULVAC Group, and enhance corporate value throughintellectual property assets.” To accomplish this basicpolicy, we are implementing four measures.

Medical-engineering collaboration

The ULVAC-Osaka University Joint Research Laboratory for Future Technology isconducting research in the medical field in which it is applying vacuum technology.
Using vacuum deposition technology, the Lab is focusing on circularly polarized lightsources for medical equipment applications and, using vacuum drying technology,
on storing of living cells and pulverization of pharmaceuticals. In particular, theLab is collaborating with the Faculty of Medicine, Osaka University, to develop
a lyophilization technology for storing living cells in powder form using ULVAC’sproprietary Micro Powder DryTM spray-freeze-drying technology, which utilizes thephenomena of water self-freezing and ice sublimation in a vacuum. If applicationof this technology realizes pulverization of blood, it will enable long-term storage ofliving blood cells for immediate use, leading to the further development of medicine.

Intellectual Property Strategy Design
Our IP grand design covers not only patent application planning but also consideration of market trends, the value
chain (from product design to disposal), ESG factors, such as energy saving, environmental impact, and social
responsibility, and revenue-generating business models.
Such a comprehensive IP strategy facilitates innovative inventions and deployment of development outcomes in
the marketplace, and contributes to acquisition of IP rights with clear objectives.
Lyophilized red blood cells

Example of IP landscaping for technology distribution

Area where threeleading
companies are
主３社競合領域
competing

ULVAC Advanced Technology Collaborative Research Cluster
The ULVAC Advanced Technology Collaborative Research Cluster (hereinafter “Collaborative Research Cluster”)
was established by ULVAC, Inc. and Tokyo Institute of Technology (hereinafter “Tokyo Tech”) on the Ookayama
Campus of Tokyo Tech on September 22, 2021. Joint study is underway, combining Tokyo Tech’s plasma diagnostics
technology and AI technology, with the aim of improving the performance of ULVAC's plasma processing equipment
by measuring plasma conditions that could not be measured previously. In the course of the past two years, wehave cultivated collaborative relationships with five more laboratories which are engaging in joint research with us
and providing academic guidance, not only with respect to plasma measurement and AI, and are addressing new
basic research themes with a view to improving the performance of our equipment. Good results are being achieved
as evidenced by presentations at academic conferences in Japan and abroad and the submission of papers. Active
discussions were held among the joint research reporting meeting and we will deepen collaboration with the aimof producing new research results that cannot beobtained through ad hoc collaborative research, but
Establishing a
are the fruits of the synergy created by laboratories
predictive model for
plasma processes
from different fields working together. Leveraging thisorganization-to-organization collaboration, we wouldPlasma
like to strengthen a wide range of relationships,
measurement
not only in joint research but also in fields such as
personnel development, leading to future growth of
AI and machinelearning
both ULVAC and Tokyo Tech as well as technologicalinnovation.
Elucidation of a physical modelof the deposition process

Precise high control of substrate
position and temperature

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ULVAC VALUE REPORT 2023

1. Respect intellectual property rights of othercompanies
2. U tilize intellectual property marketing (IPlandscape) for management
3. Integrate business, development, and intellectual
property strategies (trinity strategy)
4. P romote utilization of intellectual property andcollaboration through centralized management ofintellectual property of the entire Group

Area where ULVAC has
ULVAC優勢領域
competitive edge

Area where Company A
A社優勢領域
has competitive edge

Intellectual Property Governance Structure
The Intellectual Property Strategy Committee has been established as an organization to discuss Group-wide IP
strategies. The committee is chaired by the director in charge of innovation and is working closely with the Boardof Directors. Membership of the committee comprises those people responsible for development departments,divisions, and Group companies. In formulating intellectual property strategies, the committee adopts a bird’s-eyeview of the entire Group.
For details

Website >> Research and Development > Intellectual Property Assets (Japanese only)

ULVAC VALUE REPORT 2023

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