MMC Activities..............1
TOPICS.......................6
Members’ Profiles .........7
Worldwide R&D ............8

MMC Activities

Research Subjects for the 9th Micromachine Technology Research Grants
Center reported on the selection results, after which a list of the
grants was presented to each of the nine selected researchers.
Associate Professor Ryo Yoshida of the University of Tokyo
spoke on behalf of the grant recipients. Later, each of the threeresearchers in charge of the new research subjects that wereselected, gave a brief summary of their research plans. After the
ceremony, an informal gathering was held to allow attendees tocongratulate and chat with the grant recipients in a relaxedatmosphere.
This research grant program will be ending this year.

Subjects for the 9th Micromachine Technology Research
Grants for FY 2001 were determined at the board of directors
meeting held in March 2002. As a result of a rigorous
examination process, three new research subjects and six
ongoing research subjects in their second year were selectedfrom a large number of applications. A total of ¥ 10.6 million in
financial assistance grants will be presented.
The research grant program was started in FY 1993 as anindependent activity of the Micromachine Center intended toprovide financial assistance to researchers engaged in basic
research on various aspects of micromachine technologies. The
grants are aimed at promoting both advances in micromachinetechnologies and increased exchange and cooperation between
industry and academia.
On March 27, 2002, a ceremony to award the research
grants was held at the Chuo University Surugadai Memorial Hall.
Mr. Toshiro Shimoyama, Chairman of the Micromachine Center,gave the sponsor's greeting. Mr. Nobuhiko Sasaki, Director of
the Industrial Machinery Division, METI, appeared as the guest
speaker, and Prof. Yoji Umetani, Chairman of the IndustryAcademia Joint Research Committee of the Micromachine

Outline of the New Subjects for the 9th Micromachine Technology Research Grant
Basic Study on Microactuators Produced through Wettability Control andSurface-Tension-Driven Convection at the Liquid-Liquid-Gas Interface
Izumi Hirasawa, professor, Department of Applied Chemistry, Faculty of Sciences, Waseda University
Masato Sakurai, National Aerospace Laboratory of Japan
While wettability has conventionally been treated passively as a natural phenomenon, this study is aimed at developing
a basic microreactor technology, wherein a hydraulic circuit is formed by actively controlling the dominant wettability on a
microscale. The drive sources in this technique are interfacial tension-driven flows caused by temperature differences andthe recently discovered liquid-liquid-gas surface-tension-driven convection in a silicone oil/fluorinert system. It is hopedthat these technologies will serve as basic technologies for fluid handling systems used in space.
Liquid-liquid-gas
Marangoni convection
Hot

Silicone oil drop
Silicone oil drop

Cool
Hermeticallysealed vessel

Fluorinert
Fluorinert
Scale

Path of flow is controlled by wettability
distribution.
Fluid is driven by Marangoni convection.

Internet Home Page : http://www.mmc.or.jp/

The mechanism of Marangoni
convection was found in a silicone oilfluorinert system accommodated in ahermetically sealed vessel.

Rotation and other mechanical forces
obtained from Marangoni convection in
the silicone oil-fluorinert system.

Study on Cuff Microelectrodes using MEMS Technology
Shoji Takeuchi, Lecturer, Institute of Industrial Science, the University of Tokyo
This study focuses on microelectrodes designed to measure biological data. Electrodes built with MEMS technology canmonitor spatial and regional activity through multiple channels better than conventional needle electrodes and glass tube
microelectrodes. Accordingly, these electrodes are in extremely high demand in the field of biomedicine, where theirindustrialization is greatly anticipated. In this study, we investigate cuff microelectrodes using shape memory alloy (SMA) thinfilm microactuators with the aim of developing minimally invasive microelectrodes for taking measurements of living organisms.

Design and Fabrication of a cuff microelectrode formed of a shape memory alloy actuator designed to clip a nerve cord

Shape Memory Alloy thin film

necurrent

rve

ne
co

rve

rd

SMA thin film actuator

co

rd

Nerve
cord

Insulated with polyimide
1.

Electrode pads

The SMA is driven when a current
is applied to the electrode

Multi-point
measurements / stimulation

2.

3.

current

The electrodes are made implantable by insulating them with polyimide

Study on Heart-Emulating Microactuators Using Self-Oscillating Gel
Ryo Yoshida, Associate Professor, School of Engineering, the University of Tokyo

Swelling(oxidized state)

A novel self-oscillating gel was developed with the capacity to oscillate autonomously in a spontaneous
rhythm, like the heartbeat. A molecular design that functions to convert chemical energy into mechanical energy isachieved by inducing a cyclic BZ reaction in the gel, as in a metabolic response, causing the gel to periodicallyswelling and deswelling. In order to develop new micromachines capable of imitating biological functions, such as
self-beating/peristaltic motion actuators, we are establishing a technology for developing micro-size gel andconducting a behavioral analysis in a microenvironment. We are also conducting basic studies for constructing amaterial system.

Self-oscillating gel
Micron-sized cross-linked gel particles
Deswelling (reduced state)

Deswelling(reduced state)

Swelling (oxidized state)

No on-off stimuli, constant condition,
periodical swelling-deswelling oscillation

Exterier

Gel phase

Oxidized stateRu(bpy)33+

BrO2-•Self-beating / peristaltic motion microactuators,
micropumps, etc.
•Applications of micromachining technologies(lithography, etc.)
E.g. developing artificial cilia

CO2, etc.

Transducing circuit
Ru(bpy)32+
Reduced state
BrMA

BrO3-

Propagation of chemical wave
Oxidized region

Br -

HBrO2

Time

Br2
Malonic acidGel film with micro projection
structure array

Product
BZ reaction network

2

Hiroshima Micromachine Seminar
regarding "Micro Device Using Silicon Anisotropic Wet
Etching". Then Mr. Kazunori Okada of Harima ResearchLaboratories, SUMITOMO ELECTRIC INDUSTRIES, Ltd.,
presented a speech dealing with "LIGA Micromachining
Technology Using SR(synchrotron radiation)", and Mr. Ryo
Ohta of R&D Center, OLYMPUS OPTICAL CO. LTD., dealt with
"Research on Multifunctional Integration Film Technology".
During the interval, Mr. Ryo Ohta and Mr. Teruhisa Akashi
conducted a presentation of a 1mmøSMA micro actuator(OLYMPUS OPTICAL CO. LTD.) and a microfluid operating
device (Hitachi, Ltd.) - two portable exhibits of micromachinetechnology which had been brought to the seminar.
Accordingly, this provided an excellent opportunity for theattendants to become more familiar with micromachinetechnologies.
With a total of 45 people present - 21 individuals from 16
companies in Hiroshima prefecture, and another 24 individuals
from universities, research centers, public organizations andthe like - the seminar was both well and of considerable
significance.

Hiroshima Micromachine Seminar was held in theafternoon of February 8, 2002 at AIST Chugoku of National
Institute of Advanced Industrial Science and Technology(AIST) in Kure City. It was organized by Micromachine Center,co-organized by AIST Chugoku and Chugoku Technology
Promotion Center (CTPC), and supported by Kure Area
Industrial Promotion Center.
At this seminar, Mr. Takayuki Hirano, Executive Directorof MMC, made a speech dealing with the "MMC's Activities";
Mr. Yuich Ishikawa, Principal Research Scientist of AIST,
spoke regarding the "Characteristics of MicromachineTechnology"; Koji Yada, General manager of MMC's research
department, presented an "Overview of Results in
Micromachine Project".
In addition, as part of the introduction to the research
results of the members companies, Mr. Eiichi Yonezawa ofCorporate R&D Center Material Science and Technology
Laboratory, Fuji Electric Co., Ltd., presented a speech about"Two-Dimentional Micro-Conveyor", and Mr. Teruhisa Akashi
of Engineering Research Laboratory, Hitachi, Ltd., spoke

Eighth Micromachine Drawing Contest Award Ceremony
The Micromachine Center (MMC)-sponsored Micromachine Drawing Contest for elementary and junior high school students washeld this year for the eighth time. The contest was conducted with the cooperation of MMC's supporting members AISIN COSMOS
R&D CO., LTD., FANUC LTD., and Fujikura Ltd. as well as the schools that participated in the Fifth Micromachine Drawing Contest.
This year's contest attracted a total of 1,984 entries (957 entries in the elementary school category and 1,027 entries in the
junior high school category) submitted by students from the following 17 elementary schools and 10 junior high schools.
Participating Schools
Elementary Schools:
Arai Municipal Elementary School (Takasago, Hyogo Prefecture)
Iho Minami Municipal Elementary School*(Takasago, Hyogo Prefecture)
Iho Municipal Elementary School (Takasago, Hyogo Prefecture)

Kitahama Municipal Elementary School

Junior High Schools:

Koganei Elementary School attached to Tokyo
Gakugei University(Tokyo)Mihama-Kita Municipal Elementary School(Urayasu, Chiba Prefecture)

Igusa Municipal Elementary School(Takasago, Hyogo Prefecture)

Takasago Municipal Elementary School(Kawashima, Saitama Prefecture)

Kasumigaseki-Minami Elementary School(Takasago, Hyogo Prefecture)

Nishino-Cho Municipal Elementary School(Nishio, Aichi Prefecture)(Kawagoe, Saitama Prefecture)

Omiya-Minami Elementary School (Saitama, Saitama Prefecture)
Numasaki Municipal Elementary School

Oshino Municipal Elementary School(Oshino, Yamanashi Prefecture)(Tsukuba, Ibaraki Prefecture)

Ninomiya Municipal Elementary School

Higashi-Kakio Municipal Elementary School(Kawasaki, Kanagawa Prefecture)
Kazuya Municipal Elementary School(Koto-ku, Tokyo)(Tsukuba, Ibaraki Prefecture)

Mase Municipal Elementary School (Tsukuba, Ibaraki Prefecture)

Shoyo Municipal Junior High School (Takasago, Hyogo Prefecture)
Arai Municipal Junior High School (Takasago, Hyogo Prefecture)
Kano Municipal Junior High School (Gifu, Gifu Prefecture)
Kariya-Minami Municipal Junior High School*(Kariya, Aichi Prefecture)

Numazu School for Special Education (Shizuoka Prefecture)
Oshino Municipal Junior High School(Oshino, Yamanashi Prefecture)

Kakio Municipal Junior High School(Kawasaki, Kanagawa Prefecture)

Fukagawa 3rd Municipal Junior High School (Koto-ku, Tokyo)
Fukagawa 8th Municipal Junior High School (Koto-ku, Tokyo)
Sakuragi Municipal Junior High School(Saitama, Saitama Prefecture)( School prize awarded)*in the elementary school category, Shihori Matsukura (a 6 thgrader at Numasaki Municipal Elementary School, Tsukuba,
Ibaraki Prefecture) and the Grand Prize winner in the juniorhigh school category, Kaoru Tanaka (a 2 nd year student at
Kariya-Minami Municipal Junior High School, Kariya, Aichi
Prefecture).

A selection committee headed by Dr. Hirofumi Miura(professor, Kogakuin University) chose 15 drawings each fromthe elementary and junior high school categories. The prizewinning drawings are shown on the following pages. The award
ceremony was held on March 26, 2002 at the Science Museum,
Tokyo (Kitanomaru Park, Tokyo). The approximately 50
attendees included the winners of the Grand Prize and First
Prize in both the elementary and junior high school categories,
parents and relatives of the prizewinners, staff of theparticipating schools, guests, and members of the selection
committee.
During the award ceremony, Mr. Kenichiro Yoshida, deputy
director of the Manufacturing Industries Bureau, METI,
addressed the audience and selection committee chairman and
Kogakuin University Professor, Dr. Hirofumi Miura, explained
the selection process and commented on the work submitted.
This was followed by a few words from the Grand Prize winner3

Eighth Micromachine Drawing Contest Prizewinners
Elementary School Category
Grand PrizeYour Personal Mr. Fresh-Breath

First Prize
Let's Go, Fossil Scouts !

Second Prize
Tooth-Brushing Machine

Ai KOBAYASHI
Shihori MATSUKURA

Kenta KONISHI

Numasaki Municipal Elementary School(6th grade)

Omiya-Minami Municipal Elementary School(6th grade)

Second Prize
Robot Wiring Engineer

Yasutaka HAYASHI
Numasaki Municipal Elementary School(6th grade)

Honorable Mention
Miss. Cleaning Brush

Third Prize
Genetically-Modified Crab

Third Prize
Micromini Sensor and Earphone

Nishino-cho Municipal Elementary
School (5th grade)

Third Prize
Sick Tree-Revitalizing Machine

Yuki AMANO

Yusuke NAKAMICHI

Hideyuki SUSEKI

Oshino Municipal Elementary
School (6th grade)

Iho Minami Municipal Elementary
School (5th grade)

Omiya-Minami Municipal
Elementary School (6th grade)

Honorable Mention
Micromachine Dentist

Good Idea Award
Automatic Focus-AdjustingContact Lens

Honorable Mention
Health Machine

Misa OSONO

Misato KONDO

Mihama-Kita Municipal
Elementary School (4th grade)

Nishino-cho Municipal Elementary
School (6th grade)

Maori NAKANE
Aya HANAGATA

Nishino-cho Municipal Elementary
School (6th grade)

Mihama-Kita Municipal
Elementary School (4th grade)

Good Idea Award
Air Pollution Monitoring MachineGood Idea Award
Insect-Shaped Surgery Machine

Hayato IWASE

Shun GOTO

Numasaki Municipal Elementary
School (5th grade)

Oshino Municipal Elementary
School (6th grade)

Encouragement Award
What's a Micromachine
Doing HERE ?!

4

Encouragement Award
Repair Machine for Tiny
PlacesKumiko MINEGISHI

Kaori ABE

Oshino Municipal Elementary
School (5th grade)

Kasumigaseki-Minami Municipal
Elementary School (6th grade)Junior High School Category
Grand Prize
Micro-Dialysis MachineFirst Prize
Memories-Preserving Micromachine

Second Prize
Real-Touch Ring

Asuka SUZUKI
Kaoru TANAKA

Erika SUGAWARA

Kariya-Minami Municipal Junior High School(2nd grade)

Fukagawa 3rd Municipal Junior High School(1st grade)

Second Prize
Blood Transfusion Mistake Stopper

Sayaka SATO
Kariya-Minami Municipal Junior HighSchool (3rd grade)

Honorable Mention
Super Contact Lens

Third Prize
Ant-Shaped Robot

Third Prize
Artificial Pollinator

Third Prize
Flower-Preserving Machine

Tomoyo YAMAOKA

Minori TANAKA

Nanae NAGASAKA

Kano Municipal Junior High School(2nd grade)

Kariya-Minami Municipal JuniorHigh School (1st grade)

Kariya-Minami Municipal JuniorHigh School (2nd grade)

Honorable Mention
Forgetfulness-Preventing
Pendant

Good Idea Award
Fingertip Reading Machine

Atsushi YOSHIKAWA

Fukagawa 3rd Municipal JuniorHigh School (1st grade)

Honorable Mention
Shoulder Massaging Ladybird

Yuma FUKAZAWA

Megumi TAJIMA

Fukagawa 3rd Municipal JuniorHigh School (1st grade)

Kariya-Minami Municipal JuniorHigh School (3rd grade)

Good Idea Award
Drink-Driving Stopper

Good Idea Award
Danger Detecting / Reporting
MachineEncouragement Award
Ozone Layer-Restorer

Misako KITO

Midori NOMURAKariya-Minami Municipal JuniorHigh School (1st grade)

Fukagawa 3rd Municipal JuniorHigh School (1st grade)

Satomi WATANABE
Kariya-Minami Municipal JuniorHigh School (1st grade)

Kariya-Minami Municipal Junior HighSchool (1st grade)

Encouragement Award
Duster Taro : The Dust
Remover Machine

Haruka FUJII
Kariya-Minami Municipal JuniorHigh School (2nd grade)5

Tomoyo MIYAOKA
Kakio Municipal Junior HighSchool (1st grade)Overview of MMC's Activities in Fiscal 2002
I.

administrative trends)(4) Database construction and data management system
operations
3. Exchange and Cooperation with Worldwide Organizations
Involved with Micromachines (partially subsidized by theactivities to help promote the machine industry)(1) Participating in the 8th Micromachine Summit and holding
overseas seminars

Basic Objective of Activities

MMC's basic objectives in FY 2002 are to actively disseminate information
on micromachines from Japan as in the previous fiscal year, to engage intechnical issues regarding the fusion of micro- and nanotechnologies, and topromote the further industrialization of micromachines.

II. Description of Primary Activities
1. Investigations and Research on Micromachines
Planned activities include spurring on the rapid development of
micromachine technology, gaining a clear understanding of the trends intechnologies and industries, and conducting investigations and research on
new technological issues regarding the fusion of micro- and nanotechnologies.

We will take part in the 8th Micromachine Summit to be held at
Maastricht in the Netherlands and hold a joint seminar with local research
institutes in Europe, with the cooperation of JETRO and others.

(1) Studies on the prospects for the future of micromachinetechnology(2) Holding symposiums on micromachine technology (partiallysubsidized by the activities to help promote the machineindustry)

While we anticipate the industrialization of micromachine technologies
that have been developed thus far, from a technological perspective we mustalso strive toward further miniaturization in this new technological system of
micromachines. From an applications perspective, MMC is pursuing thefusion of micromachine technologies with technologies in other fields, such as
medical care and biotechnology. Hence, studies on the prospects of
micromachines are being implemented while conducting endeavors fromvarious angles.

This year we will hold the 8th International Micromachine andNanotechnology Symposium (provisional name) with an added topic on thefusion of micromachine technology with nanotechnology.

(3) Dispatches Overseas and Exchange with Researchers
Promotion of exchange through the dispatch of research missions
overseas and information exchanges with universities and research institutes
involved in micromachines.

(2) Studies on the R & D trend of micromachine technology inJapan and abroad(4) Constructing a foundry network system (currently
requested as part of commissioned activities to help
promote the machine industry)

Developing basic technological data to aid in developing micromachinetechnologies.

To structure enterprises providing a foundry service for engaging in theconstruction of a system aimed at improving service provision through a
network.

(3) Investigation and research on basic and sprout
micromachine technologies

4. Standardization of Micromachines(1) Creation of an international standard as a method forevaluating the properties and measuring methods of thinfilm materials.
(2) Investigation and research on micromachine standardization

Studies in the current fiscal year will be a continuation of the previous
year's studies in the fields of cell manipulation and nano-optics.

(4) Studies on the construction of a system for estimating the
micromachine market
Studies in the current fiscal year entail determining methods forconstructing a system and summarizing statistics.

This fiscal year MMC will hold an international forum/workshop in Tokyoin July.

(5) Investigation and research on scale interface(commissioned activities to help promote the machineindustry)

5. Dissemination and Education about Micromachines(1) The quarterly magazine "MICROMACHINE" will be
published periodically and distributed to those involved in
the field, and will also be provided on the Internet website.
(2) Conduct activities for disseminating information andeducating the public about micromachines, including adrawing contest in which elementary and junior high school
students draw pictures of micromachines.
(3) Hold the 13th Micromachine Exhibition.
(4) Serve as secretariat for the Federation of MicromachineTechnology to link and strengthen micromachine-relatedorganizations.

From the perspective of scale interface, MMC will study the trends of
optical devices in demand for next-generation optical communications andevaluate the sophisticated functionality possible by fusing micromachine andnanotechnologies.

2. Collection and Provision of Micromachine Information(1) Maintaining and upgrading the MMC library (to promote
the storage of information in a database)(2) Publication of a micromachine periodical (issuing"Micromachine Index")(3) Publication of a newsletter (including data on research and

TOPICSMEMS 2002 Report
The IEEE International Conference on Micro Electro
Mechanical Systems (MEMS) is an annual event, held by turns inJapan, the Unites States, and Europe. MEMS 2002 (The Fifteenth
IEEE International Conference on Micro Electro Mechanical
Systems) was held at the MGM Grand Hotel (Las Vegas, USA)between January 20 and 24, 2002. For the first time, conference
attendance exceeded 700, and the number of applications also
increased from last year, from 395 to 454, to a record high.
Although the number of oral presentations was 41, the same as inprevious years, the increase in applications resulted in a 30%
increase in the number of poster presentations, to 134. However,this year's conference continued the organizational practice of
single-presentation sessions, discussions took place in a single
conference hall packed with more than 700 people. Because ofthis, although I found the presentations themselves to besignificant from the perspective of sharing technical information,
constant murmuring throughout the conference hall created an
atmosphere at odds with intense research debate.
There was an increased number of presentations related to

the fields of Optical MEMS/Devices, Bio-MEMS, and Micro
fluidics, showing that research and development in IT- and Biorelated fields is continuing to expand. In particular, there was anotable increase in the number of presentations by speakers from
Korea, Taiwan, and China that
dealt with IT-related topics,
including RF/Wireless.
The city of Las Vegas(where the conference washeld) was dotted with
Disneyland-like attractions there was even an "Eiffel
Tower" at the Paris Las Vegas
hotel(pictured).
My
impression was of a citywhere, with the time and themoney, you could enjoy
yourself to the full.

6

Members' Profiles

Oki Sensor Device
Corporation
Perhaps you are familiar with the reed switch. So
named because its electrodes resemble the stems of a reed,a reed switch has a very simple construction with two or
three reed electrodes sealed in a small glass tube (Fig. 1).
OFF

reed

Contact point

Takao Yano
Inert gas

Managing Advicer

Glass tube

ON
N

N

S

S

S

The reed switch is also used in the float sensor todetect fluid levels. In combination with a magnet, thisswitch has many other applications, as well. In particular,
the float switch is indispensable for detecting the flowrate of gas and water, and in automotive applications that
require high reliability.
Another method frequently used for operating thereed switch consists of winding a coil around the switch
and applying a current to the coil to generate a magnetic
field. A reed switch wrapped by a coil and covered with aprotective resin or the like is called a reed relay.
A major application for reed switches is an IC tester. In
addition to their reliability-they can endure hundreds ofmillions of on/off operations-the reed switch is used for its
good high-frequency property. The reed switch was
initially developed for use in a crossbar telephoneswitchboard. Later the diameter of the switch was reduced
from its initial 30 mm or more to its current minimum of 7
mm to be provided in keyboards and the like.
In recent years, however, electronic equipment has
been developed with more functions and an increased
number of mounted parts, as represented by the cellular
phone. Hence, there has been much demand to makeeach part lighter and more compact.
Similarly, there have been numerous calls to improvethe efficiency of accommodating parts in industrial
equipment and automobiles, in order to mount a large
number of parts in a smaller space. At present it isbelieved theoretically that the reed switch can be
reduced to a minimum of 5 mm in diameter.
Today, reed relays utilizing micromachine technology(MMR: micromachined relays) are being developed. Our
company is also developing reed switches using
micromachine technology as a core product for theensuing period.
By taking advantage of the feature of reed switches(the open and closing of contact points throughmagnetism), we can provide more compact microsize
reed switches with high integration. It is our hope that
we can fill the needs of a wide-range of users by
producing reed switches, not just for current
applications, but also for markets that cannot yet utilize
reed switches; and to uncover and create new
applications.

N

Fig. 1 Operating principles of the reed switch

Unfortunately, the reed switch is not widely known
because people are not exposed to it much. However, byencapsulating the electrode contacts in a glass tube andfilling the tube with inert gas, the electrodes are notgreatly affected by external factors, such as temperatureand humidity and corrosive gases. This feature allows thereed switch to be used in various fields.
Since the reed switch is turned on and off only by
variations in a magnetic field applied externally, theswitch does not require power necessary for turning otherswitches on and off. All that is required is the reed switch
and a magnet. When a magnetic field is brought near thereed switch, an induction field is generated around thereed electrodes, which are formed of a ferromagnetic
material. As a result, the contact points on the twoelectrodes are magnetized as a north pole and a southpole and contact each other through mutual attraction.
A reed switch can be used, for example, to detect the
opening and closing of a door, such as the door of a houseor a refrigerator, by mounting a magnet on the door ordoor frame and a reed switch on the other. When the door
is closed, bringing the magnet close to the reed switch, thecontacts in the reed switch meet and close the circuit.

Float

Reed switch

MagnetFig. 2 Float sensor

7Worldwide R&D

Microscale Thermal Engineering
Takayoshi Inoue, Professor,
Department of Mechanical Sciences and Engineering Graduate School of Science andEngineering, Tokyo Institute of Technology
The primary research activities in our laboratory focus
on thermal engineering on a microscale. The researchstaff at the laboratory currently includes Associate
Professor Osamu Nakabeppu, Research Associate Yuji
Suzuki, and graduate and undergraduate students of thedepartment.
Although we use the simple term "microscale," this issuch an extensive field that we have decided to divide it
into two domains. The first is a domain on the order ofmicrons in which devices, such as microchannels,
micromachines, or MEMS, can be treated as continuums.
The second is a molecular-scale domain in which we
consider phenomena on the molecular or quantum level.
Nanotechnology, a term that is frequently heard thesedays, would probably be included in the latter domain.
Below, I introduce two or three examples of studies
conducted in our laboratory.
The first example is a method for measuring
temperatures in microspaces. The most basic activity inthermal engineering research is to measure temperature
distributions in target areas with high accuracy. However,
optical measurements become impossible at a scale lessthan the diffraction limit of light. Accurate temperature
measurements are also difficult when using a probe
because the probe itself affects the measurements. At ourlaboratory, we mounted a temperature sensor andmicroheater on the probe of an atomic force microscopeand set the probe temperature equivalent to the sample
temperature. In this way, we were able to accurately
measure temperatures at a spatial resolution of about 25
nm (Fig. 1). It is believed that a precise technology formeasuring temperatures at a submicron spatial resolution
would be beneficial to the semiconductor industry and thefield of micromachines.
Studies on the flows in microchannels are important
for CPU cooling and µ-TAS technologies. At ourlaboratory, we studied the fabrication of a laminated-type
micro heat exchanger using microchannels, as well as gasabsorption enhancing technology for microchannel flow.
Finally, we also studied a technology for forming ultrashallow junctions in semiconductors as a molecular-level
thermal engineering technology. The line width in the
CPU has been decreased to less than 0.1µm. To keep
pace with this, it has become necessary to form extremely
shallow junctions of less than 30 nm. There is demand todiffuse impurities uniformly up to 30 nm and to form asteep concentration gradient at depths greater than 30

Thermopile
T.C.

Cr (0.3µm)
Ni (0.15µm)

260µm
Heater70µm

0Topographic Image70µm

070µm 0705nm 41.7

00Temperature Image(Active Mode)

70µm
45.7:

Fig. 1 A probe for measuring temperatures in
microspaces and the temperature distribution
around fine wires electrically heatedDopant implantation

Recrystallization, HomogenizationLaser

20-30nmFig. 2 The formation of an ultra-shallow junction
nm, and also to restore a good crystalline structure. Using
simulations, we have studied the feasibility of forming
such junctions with laser heating.

MICROMACHINE No. 39
MICROMACHINE is published quarterly by Micromachine Center (MMC) to promote the international exchange of
information related to micromachines, R&D and other technical topics, and is circulated free of change. Please send
your comments about MICROMACHINE to the publisher :Takayuki Hirano, Executive Director, Micromachine Center (MMC)
MBR99 Bldg., 6F., 67 Kanda Sakumagashi, Chiyoda-ku, Tokyo 101-0026, Japan
Tel : +81-3-5835-1870, Fax : +81-3-5835-1873
Internet Home Page h t t p : / / w w w . m m c . o r . j p /Change of Address : Please send old address lebel and new address to the publisher.
Editorial and Production Management : Japan Technical Information Service (JATIS)
Date of Issue : May 17, 2002

© All Copyrights Reserved by MMC