Model 1402W Low Energy Ion Gun with Integrated Wien Filter

Design Features··········

Focusing column optimized for low energy throughput
High brightness electron impact source for maximum bulk material removal
Emission regulated bombardment provides stable ion current with front panel
adjustable dynamic range x300
Continuously variable beam energy up to 5keV
Replaceable beam trimming aperture with typical life-time of > 500 hours
Dual filaments provide operational backup with typical filament life-time > 500 hours
All UHV compatible and etch resistant materials used in fabrication
Operates over the range of inert gas species, Oxygen with optional Thoria filament
3 Degree Bend in Column for Neutral Suppression
2 Stage Differential Pumping for Operation with very low Chamber Pressure

Nonsequitur Technologies 20664 Carmen Loop #3 Bend, OR
97702 Ph: 541-312-2410 Fax: 541-312-2412

Ion Current for various Ion Species

H2+H+He+He+2

8uA
1uA
3uA
70nA

Ne20+
Ne22+
Ar+
Ar+2

1uA
100nA
5uA
100nA

Model 1402W Ion Gun SchematicEngineering Specification
Working Distance:
Beam energy:
Raster Size:
Mounting Flange:
Differential Pumping:
Supply Gas Inlet:
Source gases:
Bake-out Temperature:

20 mm
10eV to 5keV continuously variable
7 x 7 mm (minimum)
70 mm (2.75in) O.D. CF
70 mm (2.75 in) O.D. CF
34 mm (1.33 in) O.D. CF
H2, He, N2, Ne, Ar, Kr, Xe
100 °C maximum

Nonsequitur Technologies 20664 Carmen Loop #3 Bend, OR
97702 Ph: 541-312-2410 Fax: 541-312-2412

System Integration Details

1402WA Controller Features········Precise and stable lens voltages
Emission regulated electron impact supplyFront panel raster controls with external programmability
Power interlocks for safety and equipment protection
Remote On/Off control for automated operation from external equipment
Raster compensation electronics to correct for changes in sample geometry and working distanceComprehensive front panel system parameter monitoring
Wien filter voltages

Controller Specification
Input Power:
Beam Energy:
Condenser Focus:

Objective Focus:
Filament Power:
Electron Bombardment
Ion Extraction:
Deflection:

115/230VAC 50/60Hz auto-select operation. Fused at 5.0/3.0A.
0 - 5000V, 1mA switch mode supply continuously variable.
Output capacitance: 0.0047mF.
0 - 1500V, 1mA switch mode supplies independently and continuously variablethrough front panel three position rotary switches and trim-pots. Output voltages
scale with energy. Output capacitance: 0.0047mF
0 - 5000V, 1mA switch mode supply continuously variable. Output voltage scaleswith energy. Output capacitance: 0.0047mF
Emission regulated supply with front panel selectable filaments providing 5V@
5A max.
Electron accelerating voltage programmable to 200V.
Electron emission current selectable from front panel rotary switch.
Internally adjustable to 1500V.
Variable bi-polar 350VDC supply for +X, -X, +Y and -Y deflection. Remaining
octupole elements are supplied from a resistive divider network.

Nonsequitur Technologies 20664 Carmen Loop #3 Bend, OR
97702 Ph: 541-312-2410 Fax: 541-312-2412

Interlocks:

Ion Gun Parameter
Program/Monitor:
Chassis Dimensions:

HV cable disconnection turns off HV supplies.
System and Auxiliary interlocks provide total shutdown in the event of system or
auxiliary equipment failure.
USB with Graphic User Interface for programming and monitoring of all criticalparameters including lens voltages, filament current and voltage, emission
current and Wien filter voltages.
483(W)x266(H)x435.4(D) mm. 19 inch rack-mountable desktop case 6U high.

Nonsequitur Technologies 20664 Carmen Loop #3 Bend, OR
97702 Ph: 541-312-2410 Fax: 541-312-2412