2 kV backfill ion source and control

rbd

IG2 ion source package

instruments

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RBD Instruments’ IG2 Ion Source Package is the ideal solution for sputter cleaning ofsamples under UHV conditions. The IG2 Ion Source Package consists of the Model
04-165 2 kV Backfill Ion Source and the Model 32-165 Ion Source Control. These units
are interchangeable with the PHI® 04-161 and 04-162 ion guns and the PHI® 20-045
control, respectively.
The Model 04-165 Backfill Ion Source generates an energetic inert gas ion beam for
sputter-etching solid surfaces. The source requires a static pressure of 5x10-5 torr
with an inert gas such as argon. Ions are generated by electron impact within the ion
source’s dual filament ionization chamber and are then focused at the target withenergies of up to 2 kV. The impurity content of the ion beam is minimized by using
an off-axis filament geometry. A focusing lens permits high ion current density to
be obtained for a given operating pressure and source-to-sample distance. A dual
tungsten filament assembly permits continued operation when the first filament
opens. The expected lifetime of the filament assembly is several years under normal
usage at the recommended operating conditions. The filament assembly is easily
replaced in the field.
The Model 32-165 2 kV Ion Source Control provides all the necessary voltages andcurrents required to operate the Model 04-165 2 kV Backfill Ion Source. The beam
voltage may be activated manually, remotely, or with the built-in timer. Additionally,
the anode (ion) and filament currents, as well as the beam and focus voltages, may be
externally monitored to ensure accurate reproduction of sputtering conditions.

benefits

04-165:●●●●●●“Cleaner” Ion Beam: Uses an off-axis filament geometry to minimize impurities
Longer Use: Expect several years of use from the filament assembly. Additionally,
there are two filaments: If one opens, simply use the filament switch to select thesecond filament so that the 04-165 continues to work without breaking vacuum.
Easy to maintain: The filament assembly is easily replaced in the field.

32-165:●●●●●●Multiple Ways to Sputter: Activate the beam voltage manually, remotely, or withthe built-in timer.
Know Ahead of Time That You Need to Replace Your Filament: The hour meterlets you track your filament’s lifetime so you’ll know before it’s time to replace it.
Replicate Your Sputtering Conditions: Externally monitor the ion and filamentcurrents as well as the beam and focus voltages.

2 kV backfill ion source and control
IG2 ion source package
04-165ion source
specifications

Source TypeHot filament electron impact (dual filament, backfilltype)≤ 2 keV in 500 eV increments

Beam Energy
Beam Diameterat 25 mm working distance 2.5 mm FWHM (at target)
at 50 mm working distance 3.5 mm FWHM (at target)
Maximum Total Target Current 10 µA at VB = 2 kVCurrent Density
at 25 mm working distance 200 µA/cm2 when VB=2 kV, Emission Current = 30 mA
at 50 mm working distance 100 µA/cm2 when VB=2 kV, Emission Current = 30 mA
Mounting
Flange to End-of-Optics
Working DistanceSource Gases
Bake-out Temperature
32-165 ion
source control
specifications

Input PowerBeam Supply Voltage
Controls
Beam Control
Beam Voltage
Focus VoltageFilament Current
Timer
Front Panel Monitors
BeamFocus
Filament
Anode Current
Cooling
Dimensions

Standard 70 mm (2.75") CF bored flange OD,approx. 34.3 mm (1.35") ID minimum tube required
7.00" or 9.25", 2.25" less with optional X-Y Aligner(RBD P/N IG2-EA)
Typically 25-50 mm from end-of-optics to target
Typically Argon, but can also use He, Ne, Kr & Xe
200° C maximum

90-264 VAC @ 47-63 Hz, single phase, 300 mA
500 to 2000 V in 500 V increments
Manual, Timer, Remote (TTL high → on)
4-position switch
5-turn potentiometer5-turn potentiometer
1-turn potentiometer (0-60 min.)0 to 2 V corresponds to 0 to 2 kV
0 to 2 V corresponds to 0 to 2 kV (referenced to VB)
0 to 2.5 V corresponds to 0 to 2.5 A
0 to 10 mV corresponds to 0 to 10 µA
Convection
19" rack mount x 14" deep x 3" highAll specifications are subject to change without notice.

rbd
instruments

2437 NE Twin Knolls Drive • Suite 2 • Bend, Oregon • 97701
Phone: 541.330.0723 • Fax: 541.330.0991
email: sales@rbdinstruments.com • web: www.rbdinstruments.com