Environmental, Health and Safety Activities

Tokyo Electron’s corporate missions include placing the highest

1. Reducing Environmental Loads During Equipment Usagepriority on people’s health and safety and taking the global envi-In fiscal 2010, we promoted our detailed roadmap for reducing

ronment into account when conducting business activities.

environmental loads in all business departments. This roadmap
designates reducing the energy requirements of our products,

Fundamental Policy

addressing chemical substance-related matters, reducing theTokyo Electron positions environmental, health and safety activitiesnumber of parts and processes required, reducing the use of pro-as one of its most important management issues to achieve sus-

cessing gases and liquid chemicals, and improving the environmen-

tained corporate growth and continued development of society.

tal performance of existing equipment, as mandatory items. We

With that in mind, Tokyo Electron is committed to reducing environ-also set reductions in the processes required to start up equipment

mental loads across its activities, and to ensuring absolute safety in

as a voluntary category. In line with reducing both materials andthe Company’s business premises and in those of its customers.

processes, we are reviewing them as a part of our design and devel-

In order to accelerate our environmental response activities, inopment efforts, and implementing the relevant improvements.

May 2008 we codified Tokyo Electron’s environmental commitment, with “Technology for Eco Life” as the slogan guiding our2. Hazardous Substances in Products

environmental activities. One of the stipulated goals of this com-

As an environmental measure, Tokyo Electron promotes efforts tomitment is to develop production equipment that will enablereduce hazardous chemical substances in its products. Chemicalcustomers to cut the total environmental load of their factories insubstances found in the units and parts used in products arehalf by 2015, and to cut the Company’s own environmental load

managed through a dedicated database. Tokyo Electron has posi-from business activities and logistics in half by the same date. In

tioned those products in which at least 98.5% of the constituent

fiscal 2010, we formulated the criteria and roadmaps needed toparts meet standards stipulated by the Europe RoHS directive* as

fulfill this commitment, and reduced the amounts of energy used“equipment with reduced chemical substances.” Shipment ofat our manufacturing plants as an environmental investment. In

these products has been ongoing since October 1, 2008.

fiscal 2011, we will formulate and implement detailed measures
to reach our goal. Moreover, to develop these environmental,
health and safety initiatives, we believe that it is vital to promote
communication with all stakeholders and to receive feedback. In
line with this philosophy, we also actively engage in activities tocontribute to society.

EHS ManagementSince 1997, Tokyo Electron has developed and implemented environmental management systems based on ISO 14001 standards,
mainly for manufacturing operations, and obtained certification.
Also, Tokyo Electron has introduced an environmental accounting
system that quantifies the cost of its activities in respect of environmental protection, and uses this as the basis for developing
corporate action policies. For details of results for fiscal 2010,
please refer to the Tokyo Electron website.

Product-related Environmental Initiatives
Proactive Environmentally Conscious Product Design
Tokyo Electron believes that promotion of product designs sensitive to the environment is vital. Tokyo Electron has positioned
promotion of energy conservation in its products, as well as reduction and replacement of hazardous chemicals, as priority issues.

16Tokyo Electron

Annual Report 2010

* Refers to the “Restriction of the use of certain Hazardous Substances in Electrical andElectronic Equipment” directive in Europe (2002/95/EC) and its amended version. With theexception of certain applications excluded from its scope, this directive prohibits theinclusion of lead, mercury, cadmium, hexavalent chromium, PBB, and PBDE over a maximum
prescribed amount in products. (European Directive 2002/95/EC on the restriction of the useof certain hazardous substances in electrical and electronic equipment)

Health and Safety Activities
Tokyo Electron promotes health and safety in all of its operations.
This includes giving top priority to the health and safety of ouremployees and customers and designing products with safety inmind. In fiscal 2010, we reduced the number of injuries excluding
those requiring first-aid alone across the Tokyo Electron Group by
over 15% year on year, and injuries requiring first-aid by morethan 30%. Promoting activities aimed at curbing the number ofaccidents further will remain our policy going forward.
For further details, see “Environmental andSocial Report 2010” (to be published in­October 2010).
http://www.tel.com/eng/citizenship/ehsreport.htm

Tokyo Electron’s Commitment■ We aim to develop equipment that enables a 50% reduction—

The Tokyo Electron Group has assessed the impact of its products

compared to the 2007 levels—of the total environmental impact ofon the environment throughout their entire lifecycle—from procure-

new customer factories scheduled for completion in 2015 or later.

ment of major components, manufacturing and logistics to productuse. Based on this assessment, we established a goal for the year

■ We aim to reduce the impact of our business and transportation activities on the environment by 50%, by 2015, compared2015 and are promoting measures to reduce environmental impact.

to the 2007 levels.
■ We will strive to achieve these commitments in partnership withour stakeholders.

Material Procurement

Plants and Offices

Logistics

Product Usen Environmental impact in each product lifecycle phase in FY2008
CO2

Share of CO2 emissions in each lifecycle phase (%)

Approx. two million tonsof CO281%

CO2 emissions estimated by TELApprox. 200,000 tons of CO2
115,000 tons of CO2
5%145,000 tons of CO2
6%

Energy use in plants and offices

Logistics operationsin Japan and overseas

8%
Environmental impact
during material manufacturing

Environmental impact from oneyear use of the Group’s products(calculations assume the use of300mm systems)

Improvements in Cleaning Systems
With regard to cleaning systems, TEL is implementing measures to reduce
VOC* emissions, which are considered one of the most important issues inthe semiconductor industry and are tightly regulated under Japan’s Air
Pollution Control Law. IPA (isopropyl alcohol), which is used in cleaningsystems, is a volatile organic solvent. A large volume of IPA is used, andbecause of its high volatility, its concentration level in the exhaust discharged tends to be high. In order to deal with this issue, TEL installed an
IPA scrubber that sprays pure water, refrigerated cooling water, or towercooled cooling water, thereby reducing the IPA concentration in the exhaust.

n Reduction in IPA concentration in exhaust
100%
81.6% reduction18.4%
Before improvement

After improvement* VOC (Volatile Organic Compounds): A major cause of photochemical oxidants and suspended
particulate matter, thought to cause pollution and damage health.

Status of Tokyo Electron Group’s Environmental Initiatives
Organization dedicated to the environment

Environment, Health & Safety Center

Highest responsibility for the environment

Board of Directors and Board of Executive Officers

Environmental audits

Internal and external audits each conducted yearly; other irregular inter-Group audits

Introduction of environmental management systems

Acquired ISO 14001 at 8 plants and offices

Zero emissions of waste

Achieved at all domestic manufacturing bases; recycled products used in-house

Setting of energy conservation targets

Implementing energy-saving products and energy-saving targets at plants and offices

Environmental training for employees

Conducted for all employees

Punished for violating environmental regulations?

Tokyo Electron has never been punished for thisAnnual Report 2010

Tokyo Electron17