フラットパネルディスプレイ

ＦＰＤ 用有機材料の最近の進歩― プラスチック基板で何かが起こる ―2008年9月発行
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目

次は じ め に······························································································································ 1
第１章

フラットパネルディスプレイ(FPD)の動きとプラスチック基板 ·········· 2

１.１ プラスチック基板による新規なFPD構成の可能性 ··········································· 2
１.１．１ プラスチック基板を使った表示体の実用化状況 ······································· 2（１）液晶表示体(LCD) ···································································································（２）有機EL表示体(OLED) ····························································································（３）電子ペーパー ··········································································································（４）その他······················································································································
１.１．２ 基板構成の変化 ·······························································································（１）反射機能を持った基板 ····························································································（２）導光板機能を持った基板 ························································································（３）拡散機能を持った基板 ····························································································（４）集光機能を持った基板 ····························································································（５）位相差機能を持った基板 ························································································（６）偏光板機能を持った基板 ························································································（７）光散乱機能を持った基板 ························································································
１.１．３ 光学機能素子の構成の変化 ···········································································（１）バックライトユニット ····························································································（２）位相差膜、偏光板 ···································································································

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１.２ 新たに広がるディスプレイの可能性 ··································································· 7
１.２．１ プラスチック基板による表示体の形態 ······················································· 8（１）曲がった表示 ·········································································································· 8（２）ベンダブルな表示 ··································································································· 8（３）ローラブルな表示 ··································································································· 9（４）フォルダブルな表示 ····························································································· 10
１.２．２ プラスチック基板による新しい市場創出 ················································· 11
１.２．３ 各種表示体とその展開の可能性 ································································· 12（１）LCD ······················································································································· 12（２）OLED ····················································································································· 13（３）電子ペーパー ········································································································ 13（４）プラズマディスプレイパネル(PDP) ···································································· 14

１.３ 新たな低コスト、省資源プロセスの可能性 ·····················································
１.３．１ 低温加工 ·········································································································
１.３．２ 真空工程から常圧工程へ ·············································································
１.３．３ サブトラクト法からアディティブ法への移行 ·········································
１.３．４ 転写法 ·············································································································
１.３．５ 印刷法 ·············································································································
１.３．６ 設備の小型化 ·································································································
１.３．７ Roll to Roll製法(RTR) ·················································································
１.３．８ 搬送性 ·············································································································
１.３．９ 製造効率 ·········································································································
１.３．10 コスト低減 ···································································································

－i－

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１.４ プラスチックによる新しいパネル構成 ·····························································
１.４．１ TRADIMの層構成 ··························································································
１.４．２ 電子ペーパーにおけるRTR製法 ·································································
１.４．３ インセル方式 ·································································································

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１.５

今後の展望 ············································································································· 19

第２章

FPD用基板に要求される性能とプラスチック基板の対応 ····················· 21

２.１ ガスバリア性(水蒸気、酸素) ············································································· 22
２.１．１ 基板に必要とされるバリア特性 ································································· 22
２.１．２ 各種バリア性材料 ························································································· 23（１）プラスチックフィルム(有機材料)のバリア性 ·····················································（２）無機バリア分散材料 ·····························································································（３）無機バリア成膜材料 ·····························································································（４）有機バリア成膜材料 ·····························································································
２.１．３ バリア膜の付与方法(スパッタリング、CDV、コーティング) ············
２.１．４ 無機膜単独によるバリア性向上の検討 ·····················································（１）イオンプレーティング(IP)法 ···············································································（２）触媒化学気相成長(Cat-CVD)法 ············································································（３）プラズマ強化化学気相成長PECVD(Plasma Enhanced CVD)法 ·····························（４）プラズマ補助原子層堆積(PA-ALD：Plasma Assist Atomic layer deposition)法 ····
（５）大気圧近傍でのCVD法··························································································（６）転写法····················································································································（７）熱処理による欠陥の除去 ······················································································
２.１．５ ゾル－ゲルコート法によるバリア性の付与 ·············································
２.１．６ ゾル－ゲルコート法とドライ成膜による無機複合バリア膜 ················
２.１．７ 有機膜と無機バリア膜の積層膜 ·································································（１）同一設備で無機膜・有機膜を形成する方法 ·························································（２）ドライ成膜とウェット成膜を使った無機・有機積層膜 ······································（３）層状無機粒子複合有機材料と無機バリア膜の積層 ··············································
２.１．８ バリア性付与におけるその他の課題 ·························································
２.１．９ OLEDにおけるバリア材 ··············································································（１）バリアフィルムによる封止 ··················································································（２）バリア薄膜による封止 ··························································································（３）吸湿・吸収機能を有するOLED用基板··································································（４）バリア膜(封止膜)の製造設備 ···············································································（５）ガラス基板によるOLED構造およびOLEDの安定性試験······································
２.１．10 バリア性の評価方法 ···················································································
２.１．11 バリア性のまとめ ·······················································································

２.２ 吸水性･吸湿性 ·······································································································
２.２．１ FPD製造における吸水の発生する工程 ·····················································
２.２．２ 一般的な基板材料の吸水特性 ·····································································
２.２．３ 吸水性をカバーする対策 ·············································································

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（１）樹脂の改質による吸水性の改良 ··········································································· 58（２）コーティング樹脂による吸水性の制御 ································································ 58（３）吸水性をカバーするセル化工程 ··········································································· 59－ii－

２.３ 耐熱性 ····················································································································· 59
２.３．１ 基板における耐熱性の要求特性 ································································· 60（１）導電膜の形成における加工温度 ···········································································（２）TFTの形成における加工温度 ················································································（３）CF、隔壁、柱状スペーサ等の形成における加工温度 ·········································（４）配向膜の形成における加工温度 ···········································································（５）封止工程での加工温度 ··························································································（６）OLEDにおける加工温度························································································（７）電子ペーパーにおける加工温度 ···········································································（８）PDPにおける加工温度 ··························································································
２.３．２ プラスチック基板の耐熱性向上 ·································································
２.３．３ 各種機能層の低温形成技術 ·········································································（１）導電膜の低温形成 ·································································································（２）TFTの低温形成 ······································································································（３）カラーフィルタ(CF)、有機EL素子の低温形成····················································（４）隔壁、スペーサ、配向膜、シール剤等の低温形成 ··············································
２.３．４ 低温加工可能な機能材料の開発状況 ·························································

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２.４ CTE(寸法変化) ····································································································· 69
２.４．１ プラスチックにおけるCTEの低減検討 ····················································· 69（１）層状無機粒子材料の複合 ······················································································（２）無機繊維材料の複合 ·····························································································（３）有機繊維材料との複合 ··························································································（４）樹脂改質 ················································································································（５）熱処理、延伸等 ·····································································································
２.４．２ FPD加工時におけるCTE低減の検討 ·························································（１）ガラス等剛性基板への固定(貼り合せ)によるCTE変化の低減 ····························（２）金属薄板とプラスチックフィルム複合基板による透過型LCD基板 ····················
２.４．３ ソリ防止の検討 ·····························································································（１）積層される膜材料と基板材料とのCTEを近づけることによるソリの低減 ·········（２）高ヤング率基板 ·····································································································（３）対称型の構造を持たせた基板 ···············································································（４）接着層を緩衝層として使用する方法 ····································································（５）無機膜を、成膜休止期間等を設けて形成する方法 ··············································（６）表示体パネル全体のソリを低減する方法 ····························································
２.４．４ CTEのまとめ ·································································································

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２.５ 平滑性(平坦性) ····································································································· 76
２.５．１ 平滑性の要求特性 ························································································· 76（１）OLEDにおける平滑性(平坦性)の要求特性 ··························································（２）LCDにおける平坦性の要求特性 ···········································································（３）バリア層形成のための平滑層または基板の平滑性 ··············································
２.５．２ 平滑性の付与方法 ·························································································（１）超平滑性を有するPES基板····················································································（２）超平滑コーティング層を有するPEN基板材料······················································（３）超平滑コーティング層を有する耐熱PC基板材料 ·················································（４）超平滑性を有するセルロース系基板材料 ····························································（５）ガラスクロス等無機繊維材料との複合基板の平坦化法 ······································

－iii－

76
77
77
79
80
80
80
80
80

２.５．３平滑化材料 ····································································································· 82（１）オキセタン含有平坦化材料 ·················································································· 82（２）アクリル系コーティングにおける表面自由エネルギーと平滑性 ························ 82（３）カルド系紫外線硬化型平滑化コーティング剤 ····················································· 83（４）金属アルコキシドによる平坦化層(バリア性向上を目的として)························ 83（５）塗布特性に優れたアクリレート共重合体平滑化材料 ·········································· 84

２.５．４

評価法と課題 ································································································· 84

２.６ 透明性(光線透過性) ····························································································· 84
２.６．１ プラスチック材料の可視光線部での透過性向上 ····································· 84（１）脂肪族ポリイミド(PI)による透明性向上 ····························································· 86（２）フッ素化ポリイミド(PI)による高い光線透過性フィルム ··································· 86

２.６．２

無機粒子フィラー複合材料における透明性維持・向上 ························ 86（１）層状無機化合物フィラー分散 ··············································································· 86（２）ナノ粒子－有機マトリックス ··············································································· 87（３）粒子分散系エポキシ樹脂基板 ··············································································· 87

２.６．３

無機繊維、有機繊維との複合基板の透明性維持・向上 ························ 87（１）ガラスクロスと屈折率が近似した基板材料構成 ················································· 87（２）ガラスに近いアッベ数を持つ材料選択 ································································ 88

２.６．４
２.６．５

表面コーティングによる透明性の向上 ····················································· 89
紫外部における透過性 ················································································· 89（１）基板に要求される紫外線透過特性 ······································································· 90（２）紫外部の透過性の良いセルロース形基板材料 ····················································· 90

２.７ 複屈折およびレタデーション(位相差)制御 ·····················································
２.７．１ 複屈折とレタデーション(位相差)の発生機序 ·········································
２.７．２ 基板材料に要求される光学等方性・レタデーション特性 ····················
２.７．３ 固有屈折率の低減の試み ·············································································

91
91
92
93

（１）ナノサイズの針状無機結晶微粒子のドープ ························································· 93（２）低分子化合物のドープおよび共重合 ···································································· 93（３）負の固有屈折率を有するポリマーとのブレンド ················································· 93

２.７．４
２.７．５

光弾性複屈折の制御 ····················································································· 93
低レタデーション材料開発 ········································································· 94（１）脂肪族ポリエステル基板材料 ··············································································· 94（２）脂肪族ポリカーボネート ······················································································ 94（３）シリコーン基板材料 ····························································································· 95

２.７．６

ガラス複合材料におけるレタデーション、光漏れの解消 ···················· 95（１）繊維の配列を規制したレタデーション制御 ························································· 95（２）低弾性率樹脂複合基板による光漏れの解消 ························································· 95（３）偏光板による光漏れの解消 ·················································································· 96（４）負の屈折性を有する液晶のドーピング ································································ 96

２.８ 剛性･弾性率 ··········································································································· 96
２.８．１ 高剛性材料 ····································································································· 97
２.８．２ 低剛性材料 ····································································································· 97（１）曲げ弾性率が1GPa以下の低剛性基板材料 ···························································· 97（２）もろさを改良したフレキシブル基板材料 ···························································· 97－iv－

２.８．３

熱時高弾性を維持する方法 ········································································· 97（１）延伸処理とゲル化処理 ·························································································· 97（２）有機無機ハイブリッド ·························································································· 97

２.８．４

小さな曲率半径への検討 ············································································· 98

２.９ 接着性・積層性 ····································································································· 98
２.９．１ 接着性、積層性を親和性の向上により得る方法 ····································· 99（１）シルセスキオキサン化合物含有ポリマー ···························································· 99（２）オキセタン環含有エポキシ樹脂 ········································································· 101（３）酸化炭化珪素もしくは酸化窒化炭化珪素層による接着性向上 ························· 101（４）バリア中間層の有機層を親水化する方法 ·························································· 102（５）MoN膜形成時に親和性を付与させる方法 ·························································· 103

２.９．２
２.９．３
２.９．４

応力分散層による密着性向上 ··································································· 103
粗面化による接着性向上 ··········································································· 103
接着剤、コーティング剤等の改良 ··························································· 104（１）カラーフィルタ等への密着性に優れた硬化性組成物 ········································ 104（２）ポリエステルフィルムへの密着性に優れたコート剤 ········································ 104（３）その他·················································································································· 104

２.10 化学的安定性(耐薬品性) ··················································································· 105
２.10．１ 無機膜による耐薬品性の付与 ··································································· 105（１）耐酸性の高い無機膜 ··························································································· 105（２）プラズマ耐性膜のウェットプロセスによる形成 ··············································· 105

２.10．２有機膜のコーティングによる耐薬品性の付与 ······································· 106（１）オキセタン環含有エポキシ樹脂コート膜 ·························································· 106（２）非溶出性脂環式オレフィン樹脂コート膜 ·························································· 106

２.11

価格 ······················································································································· 106

２.12

まとめ ··················································································································· 107

第３章

プラスチック基板開発の動向 ······································································· 108

３.１ プラスチック基板 ······························································································· 108
３.１．１ 飽和ポリエステル(PET)系樹脂基板 ······················································· 108（１）汎用PETフィルムの表面改質法 ·········································································· 109（２）基板用PET材料の開発 ························································································· 110

３.１．２

ポリエチレンナフタレート(PEN)樹脂基板 ·········································· 111（１）平面平滑性に優れた光学用PENフィルム ··························································· 113

３.１．３
３.１．４

架橋フマル酸ジエステル系樹脂基板 ······················································· 115
ポリカーボネート(PC)系樹脂基板 ························································· 116（１）耐熱性の向上 ······································································································ 117（２）レタデーションの改善 ························································································ 120（３）超バリア性を有するPC樹脂フィルム基板 ·························································· 123

３.１．５

ポリエーテルスルフォン(PES)樹脂基板 ··············································· 123（１）バリア性を付与した導電性基板 ········································································· 125（２）表面平滑化 ·········································································································· 125（３）液晶ポリマー(LPS)との共押出し基板 ······························································· 125－v－

３.１．６
３.１．７

ポリスルフォン(PSF，PSU)樹脂基板 ··················································· 126
ポリアリレート(PAR)樹脂基板 ······························································· 126（１）耐熱性、耐候性に優れたPAR樹脂および基板 ··················································· 126（２）高耐熱PAR系樹脂基板 ························································································ 128（３）PARと耐熱支持材料とのハイブリッド ······························································ 128

３.１．８

環状ポリオレフィン(COP，COC)樹脂基板 ········································· 128（１）耐熱性の向上 ······································································································ 130（２）CTEを改良したCOP基板 ····················································································· 132（３）ガラス表面への樹脂膜材料(表面コート樹脂) ··················································· 133

３.１．９

セルロース系樹脂基板 ··············································································· 134（１）耐熱性の向上 ······································································································ 135（２）レタデーション特性の改善 ················································································ 136（３）バリア性の向上した可塑剤減量セルロース系基板 ············································ 137（４）その他セルロース系材料の特性向上策 ······························································ 137

３.１．10ポリイミド(PI)樹脂基板 ·········································································· 138（１）透明性PI基板材料································································································ 139（２）CTEの改善 ··········································································································· 141（３）高耐熱・低吸水透明PIフィルム基板 ·································································· 143（４）高耐熱・高屈折率透明PIフィルム基板 ······························································ 144

３.１．11
３.１．12
３.１．13３.１．14ポリアミドイミド(PAI)樹脂基板 ···························································
マレイミド－オレフィン樹脂基板 ·························································
ポリアミド(PA)樹脂基板 ········································································
アクリル系樹脂基板 ·················································································

145
145
148
149

（１）耐熱性の向上 ······································································································ 149（２）CTEの改善 ··········································································································· 152（３）低Tgアクリル樹脂基板 ······················································································· 154

３.１．15３.１．16フッ素系樹脂基板 ····················································································· 154
エポキシ系樹脂基板 ················································································· 155（１）ガラスクロス複合基板 ························································································ 158（２）拡散機能を有する基板 ························································································ 161（３）フィラー分散系樹脂基板 ···················································································· 163（４）エポキシ樹脂単体シート基板 ············································································· 166

３.１．17３.１．18３.１．19３.１．20３.１．21３.１．22
３.１．23シリコーン系樹脂フィルム基板 ·····························································
ポリベンズアゾール系樹脂基板 ·····························································
エピスルフィド化合物による基板 ·························································
液晶ポリマー(LCP)基板 ··········································································
シアネート系樹脂基板 ·············································································
芳香族エーテル系樹脂基板 ·····································································
その他のプラスチック基板 ·····································································

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（１）酸化ケイ素･樹脂複合基板 ·················································································· 174（２）光学等方性の耐熱フィルム ················································································ 174（３）耐熱180℃の透明基板フィルム ··········································································· 174（４）バリア性の高いOLED用基板 ·············································································· 174（５）脂肪族系の添加による透明PI基板 ······································································ 174（６）スーパーエンプラ ······························································································· 174－vi－

３.２ プラスチック基板の改質 ··················································································· 175
３.２．１ 無機粒子複合基板 ······················································································· 175（１）ナノ粒子との複合 ······························································································· 175（２）高熱伝導性基板 ··································································································· 177

３.２．２

ファイバー複合基板 ··················································································· 178（１）バイオナノファイバー複合基板 ········································································· 178（２）ガラスフレーク／ガラスファイバーの複合基板 ··············································· 179

３.３ プラスチック基板と無機基板とのハイブリッド基板 ··································· 179
３.３．１ ガラス／プラスチック ··············································································· 179（１）ガラスをプラスチックで強化した基板 ······························································ 180（２）ガラス基板とプラスチック基板の組み合せディスプレイ ································· 180

３.３．２

金属／プラスチック ··················································································· 181（１）低CTE基板 ··········································································································· 181（２）表面平滑性の高い基板 ························································································ 181（３）反射型、透過型のディスプレイ基板 ·································································· 181

３.３．３

粘土を主成分とする複合耐熱フィルム ··················································· 182

３.４ 基板への機能の付与 ··························································································· 183
３.４．１ 反射型LCDにおける反射機能を持った基板 ··········································· 183（１）指向性パターンを持つ反射型基板 ····································································· 183（２）非指向性反射型基板 ··························································································· 185

３.４．２

導光板機能を持った基板 ··········································································· 186（１）光ガイド板を基板として使用 ············································································· 186（２）集光機能・散乱機能を有する接着層による導光板と基板の貼合わせ ·············· 187

３.４．３

拡散機能を持った基板 ··············································································· 187（１）拡散層をセルの内側に形成した基板 ·································································· 187（２）微粒子分散型拡散機能を有するエポキシ樹脂基板 ············································ 188（３）高屈折樹脂と散乱粒子からなるOLED用拡散機能つき基板 ······························ 188

３.４．４
３.４．５

集光機能を持った基板 ··············································································· 189
偏光機能・位相差機能を持った基板 ······················································· 190（１）延伸による位相差機能付与 ················································································ 190（２）液晶化合物塗布法による偏光・位相差機能の付与 ············································ 192

３.４．６
３.４．７
３.４．８

防眩機能を有する基板 ··············································································· 193
多機能膜の複合基板 ··················································································· 194
光学補償機能を液晶セル内部に取込む方法(インセル方式) ·············· 196

３.５ プラスチック基板のまとめ ··············································································· 199
３.５．１ プラスチック基板材料の機能向上動向 ··················································· 199
３.５．２ 各用途別の基板開発の状況と将来見通し ··············································· 200（１）電子ペーパー ······································································································ 200（２）LCD ····················································································································· 200（３）OLED ··················································································································· 201

３.５．３

プラスチック基板を使った表示体の将来見通し ··································· 201（１）LCDにおける基板の複合化 ················································································· 201（２）LCDにおけるインセル方式の製造······································································ 201（３）RTR製法 ·············································································································· 201

－vii－

第４章

各種光学機能素子およびフィルムの開発動向と複合化の動き ··········· 203

４.１ LCDにおけるバックライトユニット(BLU) ···················································
４.１．１ バックライトユニットの種類と用途 ·······················································
４.１．２ BLUを構成するフィルムシート市場 ·······················································
４.１．３ バックライトユニット(BLU)に要求される性能 ···································
４.１．４ BLUでの機能向上、複合化 ·······································································
４.１．５ バックライト光源 ·······················································································（１）点光源(LED) ·······································································································（２）面光源① 無機EL(FEL) ······················································································（３）面光源② 有機EL ································································································
４.１．６ 導光板 ···········································································································（１）導光板＋プリズムシート ····················································································（２）逆プリズム導光板＋逆プリズムシート ······························································（３）マイクロレンズ構造を介し導光板と拡散フィルムを一体化 ·····························（４）ダブルプリズム技術によるメイン／サブの両面表示 ········································（５）楔形状を持ったマット／プリズム導光体(MPLG) ·············································（６）携帯電話用LED光源での薄肉化 ·········································································
４.１．７ 集光フィルム(プリズムシート) ·······························································（１）プリズムシートの要求特性 ················································································（２）プリズムシートの概要 ························································································（３）エッジライト型全反射方式プリズムシート ·······················································（４）頂角に極端な非対称性を導入したプリズム ·······················································（５）非モワレタイプのプリズムフィルム ··································································（６）マイクロレンズ方式の集光フィルム ··································································（７）ホログラムによる集光フィルム ·········································································（８）拡散機能を有するプリズムシート ·····································································（９）光入射端面の近傍における輝線の発生防止 ·······················································
４.１．８ 拡散フィルム(拡散板) ···············································································（１）拡散板への要求特性 ···························································································（２）拡散フィルムの原理 ···························································································（３）微小ビーズの表面コーティング ·········································································（４）内部拡散方式 ······································································································（５）内部拡散と微小ビーズコーティングの組み合わせ ············································（６）光学的表面処理 ···································································································（７）光散乱ポリマー導光体 ························································································（８）ポリアミド多孔性球状粒子 ················································································
４.１．９ 反射フィルム(シート) ···············································································（１）多層光学フィルムによる可視光全反射フィルム ···············································（２）拡散性反射フィルムおよび反射機能を有する基板 ············································
４.１．10 輝度向上フィルム ·····················································································

４.２ 偏光板 ···················································································································
４.２．１ 偏光板の市場 ·······························································································
４.２．２ 概要と要求性能 ···························································································
４.２．３ 新しい偏光子の提案 ···················································································

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（１）ワイヤーグリッド型偏光子 ················································································ 238－viii－

（２）LB膜による偏光子 ······························································································ 240（３）液晶性材料による偏光子 ···················································································· 240

４.２．４

偏光板製品の種類 ······················································································· 241（１）反射板／半透過反射板つき偏光板 ····································································· 241（２）楕円偏光板 ·········································································································· 241（３）円偏光板 ·············································································································· 241（４）高視野角偏光板 ··································································································· 242（５）輝度上昇フィルムつき偏光板 ············································································· 242（６）温度追随型光学補償フィルム付き偏光板 ·························································· 242（７）防眩(AG)、反射防止(AR)機能の付与 ································································· 242

４.２．５

セルロース系偏光子保護フィルム ··························································· 243（１）偏光板の薄肉化 ··································································································· 243（２）位相差の湿度依存性を改良したセルロース誘導体フィルム ····························· 244（３）位相差機能を持った二軸延伸TAC······································································ 245

４.２．６

セルロース系以外の位相差機能を有する偏光子保護フィルム ·········· 246（１）COP系 ·················································································································· 246（２）マレイミド－アクリル共重合系 ········································································· 247（３）架橋フマル酸ジエステル系 ················································································ 248（４）複屈折を消去できる偏光子保護フィルム ·························································· 248

４.２．７

斜め延伸位相差フィルムによる偏光子保護フィルム ·························· 249（１）COP斜め延伸フィルム ························································································ 249（２）ボーイング現象(軸ズレ現象)を防止できる斜め延伸 ········································ 250（３）富士フイルムの斜め延伸フィルム ····································································· 251（４）斜め延伸のシミュレーション ············································································· 251（５）斜め延伸装置 ······································································································ 251

４.２．８

塗布法による斜め位相差付与偏光保護フィルム ··································· 251（１）塗布型補償板付き偏光板 ···················································································· 251（２）視野角拡大機能を付与した塗布型位相差フィルム ············································ 252（３）パターン状の光学軸を任意に調整できる光学補償偏光板 ································· 252

４.２．９ 無機EL表示(ELD)への偏光板の利用 ······················································· 253
４.２．10 偏光板のまとめ ························································································· 253
４.３ 位相差フィルム ···································································································
４.３．１ 屈折率楕円体と位相差フィルムの種類 ···················································
４.３．２ 位相差フィルムの必要特性 ·······································································
４.３．３ 位相差フィルム用材料としてのPCとCOPの比較 ·································
４.３．４ 液晶モードとそれに必要な位相差板および偏光補償 ··························

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（１）STN液晶用位相差フィルム ················································································· 258（２）TN液晶用位相差フィルム ··················································································· 258（３）VA液晶用位相差フィルム ··················································································· 258（４）IPS液晶用位相差フィルム ·················································································· 259（５）OCB液晶用位相差フィルム ················································································ 261

４.３．５

負の複屈折特性を持つ位相差フィルム ··················································· 261（１）PS系ポリマー位相差フィルム ············································································ 262（２）PS/PPOポリマーブレンド位相差フィルム ·························································· 262（３）マレイミド共重合ポリマー位相差フィルム ······················································· 263－ix－

（４）COP系位相差フィルム ························································································ 265（５）非晶質ポリマー層を含む光学補償フィルム ······················································· 265（６）正の固有複屈折性添加剤によるレタデーション制御 ········································ 265

４.４ 液晶性材料を使った光学補償フィルム ··························································· 266
４.４．１ 液晶性材料の特徴 ······················································································· 266
４.４．２ 配向基板上に高分子液晶を塗布する方法 ··············································· 267（１）ディスコティック液晶 ························································································ 267（２）高分子ネマティック液晶 ···················································································· 269（３）コーティング時の表面欠陥の低減法 ·································································· 271

４.４．３

配向基板上に重合性液晶材料を塗布・重合する方法 ·························· 271（１）TN液晶用光学補償フィルム ··············································································· 273（２）ハイブリッド配向による光学補償フィルム ······················································· 273（３）ディスコティック配向による逆波長分散位相差フィルム ································· 274（４）コレステリック配向の位相差フィルム／偏光子 ··············································· 274（５）ホメオトロピック配向の重合性液晶／光学補償フィルム ································· 275（６）光配向膜を用いた任意な配向を持つ位相差フィルム ········································ 277（７）RTR製法への適用 ······························································································· 278（８）重合性液晶の空気界面付近で起こる配向不良に対する対策 ····························· 278

４.４．４

光配向性重合性液晶 ··················································································· 279（１）光配向性高分子液晶(PPLC) ··············································································· 279（２）シンナメート基を含むメソゲン性液晶性化合物 ··············································· 280（３）UV光で配向固定できる重合性液晶材料····························································· 281

４.５ 各種FPDに共通に用いられる機能性フィルム ··············································· 281
４.５．１ 反射防止･防眩フィルム(AR, LR, AG) ···················································· 281（１）ウェットプロセスによる反射防止膜 ·································································· 282（２）凹凸形状を有する反射防止膜 ············································································· 283（３）蛾の目(モスアイ)型反射防止膜 ········································································· 284

４.５．２

ハードコート・防汚コート ······································································· 285（１）干渉縞(モアレ)の発生のないハードコート剤 ··················································· 285（２）フッ素系の防汚コーティング材料 ····································································· 285

４.６

OLED用光学フィルム ························································································ 286（１）輝度向上フィルム ······························································································· 286（２）コントラスト向上用位相差フィルム ·································································· 287（３）バックライトでの輝度向上フィルムの効果 ······················································· 287

４.７

PDP・FED用光学フィルム ··············································································· 287

４.８

まとめ ··················································································································· 289（１）LCD用光学フィルム ···························································································· 289（２）OLED用光学フィルム ························································································· 290（３）FPDに共通する光学フィルム ············································································· 291

第５章

プラスチック基板における表示体の製造 ·················································· 292

５.１ 透明導電膜の形成(電極製造) ··········································································· 292
５.１．１ 無機導電膜のドライプロセスによる成膜 ··············································· 292（１）ITO導電膜 ··········································································································· 293－x－

（２）ZnO(ZAO)導電膜 ································································································ 296（３）IZO導電膜 ··········································································································· 297（４）IWO導電膜 ·········································································································· 297（５）大気圧近傍CVDによる成膜 ················································································ 298５.１．２

無機導電膜のウェットプロセスによる成膜、回路形成 ······················ 300（１）導電材料 ·············································································································· 300（２）膜形成方法 ·········································································································· 301

５.１．３

有機導電膜 ··································································································· 302（１）有機導電膜材料 ··································································································· 302（２）ウェットプロセスによる導電薄膜形成 ······························································ 302

５.１．４ 有機導電膜と無機導電膜の積層 ·······························································
５.１．５ 透明導電膜のまとめと課題 ·······································································
５.２ TFT、TFDの形成 ································································································
５.２．１ a-Si系TFTの形成 ························································································

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（１）シリコン膜の低温形成 ························································································ 308（２）高耐熱・低CTE基板を用いた低温a-SiTFT加工 ·················································· 309（３）低耐熱基板への直接形成 ···················································································· 309（４）プラスチック基板上でのa-SiTFT形成の課題とその解決法 ······························· 310

５.２．２

p-SiTFTの形成 ···························································································· 312（１）p-Siの直接形成法 ································································································ 312（２）p-SiTFTの転写法による形成 ··············································································· 314（３）トランスファー法 ······························································································· 321（４）プラスチック基板上のp-SiTFTの移動度 ···························································· 322

５.２．３
５.２．４

印刷法による無機系半導体の形成方法 ··················································· 322
新規な無機系TFT(TFD)材料 ···································································· 323（１）透明非晶質－酸化膜トランジスタ(TAOS) ························································ 323（２）半導体コロイダルナノドットによるTFT ··························································· 324（３）CNTによるTFT ···································································································· 324（４）ZnOによるTFT ···································································································· 325

５.２．５

有機TFT(O-TFT)の形成 ············································································ 325（１）気相法形成での課題と解決 ················································································ 326（２）印刷法によるO-TFTの製造 ················································································· 329（３）有機半導体を使った縦型半導体 ········································································· 333

５.２．６

新規な有機半導体 ······················································································· 334（１）生体高分子絶縁膜による強誘電FET型のメモリ素子 ········································· 334（２）液晶性有機半導体 ······························································································· 335

５.２．７

TFT形成のまとめ ······················································································· 337（１）Si系TFT ················································································································· 337（２）その他の無機系TFT ···························································································· 338（３）有機半導体 ·········································································································· 338

５.３ カラーフィルタ(CF)の形成 ·············································································· 338
５.３．１ 印刷法 ··········································································································· 340（１）インクジェット(IJ)法 ························································································· 340（２）ドライオフセット法 ··························································································· 342（３）塗布法等による方法 ··························································································· 342－xi－

５.３．２

転写法 ··········································································································· 342（１）ガラス基板上に形成したCFの転写 ····································································· 342（２）転写フィルム(ドライフィルム)を用いる方法 ··················································· 344
５.３．３ RGB方式以外のCF方式 ············································································· 345（１）2色CF··················································································································· 345（２）4色以上の多色CF ································································································ 345
５.３．４ CF形成バインダ材料 ················································································· 345（１）ITO電極膜の抵抗上昇を防ぐCFバインダ材料 ···················································· 345（２）CFバインダ材料のポストベークの必要性 ·························································· 346
５.３．５ CF形成の例と作製時の課題解決 ····························································· 346（１）構成物質を集約したCFの製法 ············································································ 346（２）プラスチック基板の伸縮を考慮した設計 ·························································· 347（３）CF形成時の基板の収縮･変形防止······································································· 348（４）CF層の表面平滑化 ······························································································ 348
５.４ OLEDの形成 ········································································································ 349
５.４．１ 低分子系有機EL材料および有機EL素子の形成 ············································ 350（１）低分子有機EL材料 ······························································································ 350（２）低分子系の有機EL素子の形成方法 ····································································· 350
５.４．２ 高分子系有機EL材料および有機EL素子の形成 ····································· 351（１）高分子系有機EL材料 ··························································································· 351（２）高分子系有機EL素子の形成方法 ········································································ 352（３）色素分散型高分子系有機EL材料 ········································································ 355
５.４．３ リン光系材料と有機EL素子の形成 ·························································· 356（１）リン光材料 ·········································································································· 356（２）リン光材料を使ったOLED ·················································································· 358
５.４．４ OLEDの課題解決 ························································································ 358（１）光学フィルムによる発光効率の向上 ·································································· 358（２）高いバリア性の付与 ··························································································· 358（３）層構成の検討 ······································································································ 359（４）材料の発光効率向上 ··························································································· 359（５）プラスチック基板における課題 ········································································· 360（６）その他の課題 ······································································································ 360
５.５ その他のLCD、OLED構成材料 ········································································ 361
５.５．１ 隔壁形成材料 ······························································································· 361
５.５．２ スペーサ ······································································································· 363（１）スペーサ材料 ······································································································ 364（２）スペーサの形成法 ································································································· 367（３）トップエミッションOLEDにおけるBMを兼ねたスペーサ ································ 368
５.６ 配向膜 ··················································································································· 369
５.６．１ 配向膜の役割と要求特性 ··········································································· 369
５.６．２ 液晶の種類と配向モード ··········································································· 369
５.６．３ 配向膜の成膜 ······························································································· 370
５.６．４ 配向方法の比較 ··························································································· 371
５.６．５ ラビング法 ··································································································· 372（１）傾斜ラビング法 ··································································································· 372（２）課題、解決法 ······································································································ 373－xii－

５.６．６光配向膜 ·······································································································（１）ポリイミド系 ······································································································（２）ポリアミド系 ······································································································（３）シンナモイル系 ···································································································
５.６．７ カルコン系光配向膜 ···················································································（１）カルコン基を側鎖に持つ高分子配向膜 ······························································（２）カルコン基を側鎖にもつポリイミド配向膜 ·······················································（３）カルコニル基を側鎖に有する
ポリメタクリル酸エステルとポリイミドの配向挙動 ········································
５.６．８ アゾ染料系光配向膜 ···················································································（１）低分子アゾ染料系配向膜 ····················································································（２）アゾ誘導体の重合体配向膜 ················································································（３）重合性アゾ系配向膜 ···························································································（４）アゾ誘導体を高分子で固定した配向膜 ······························································
５.６．９ 光配向による配向モードおよび配向法 ···················································（１）配向方法 ··············································································································（２）垂直配向モード ···································································································（３）その他の液晶の配向モード ················································································
５.６．10 レーザ配向法 ·····························································································
５.６．11 イオンビーム配向法 ·················································································
５.６．12 ポリマー繊維ネットワークによる配向制御 ·········································
５.６．13 パターン配向法 ·························································································（１）マイクロパターン配向 ························································································（２）マルチドメイン垂直配向(MVA) ········································································
５.６．14 無機系配向膜 ·····························································································（１）無機配向膜 ··········································································································（２）有機無機ハイブリッド配向膜 ·············································································
５.６．15 その他の配向法 ·························································································
５.６．16 配向膜のまとめ ·························································································
５.７ 液晶注入、インク注入 ·······················································································
５.７．１ 滴下法 ···········································································································（１）滴下法の特徴 ······································································································（２）コーナー部の気泡発生対策 ················································································
５.７．２ 印刷法・塗布法 ···························································································
５.７．３ 常圧充填法 ···································································································
５.８ 貼合わせ・切断 ···································································································
５.８．１ シール材を使わない貼合方法 ···································································
５.８．２ シール材(シール剤) ···················································································（１）プラスチック基板用シール材 ·············································································（２）ガラス基板用光硬化型シール材 ·········································································（３）滴下法に対応したガラス基板用シール材 ··························································
５.８．３ 切断 ···············································································································
５.９ RTR製法と枚葉製法 ···························································································
５.９．１ RTR製法 ·······································································································（１）LCDのパネル化 ···································································································（２）PDLCD(PNLCD)のRTR製法 ················································································－xiii－

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（３）OLEDのRTR製法 ·································································································（４）電子ペーパーのRTR製法 ····················································································（５）単一基板を使ったセル化法 ················································································
５.９．２ ガラス基板製造ラインを用いる方法 ·······················································
５.10 パネル化工程 ·······································································································
５.10．１ 各種光学フィルムとの貼合 ·······································································
５.10．２ 電極接合 ·······································································································
５.11 まとめ ···················································································································

第６章

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プラスチック基板による各種FPDの開発状況 ········································· 414

６.１ 液晶表示体(LCD) ······························································································· 414
６.１．１ ガラス基板大型LCDの最近の動き ··························································· 416（１）薄肉化··················································································································（２）高視野角化 ··········································································································（３）高コントラスト化 ·······························································································（４）応答速度の向上 ···································································································（５）省電力化 ··············································································································
６.１．２ ガラス基板モバイルLCDの最近の動き ···················································（１）薄肉化··················································································································（２）高精細化 ··············································································································（３）省電力化 ··············································································································
６.１．３ ガラス基板での新規な表示方式 ·······························································（１）CFを使わないカラー表示 ···················································································（２）特殊な視野効果を得る表示方法(主として三次元表示：3D) ····························
６.１．４ プラスチック基板による静止画及び半動画対応LCD開発 ···················（１）STN-LCD ·············································································································（２）TN-LCD ···············································································································（３）コレステリックLCD(ch-LCD) ············································································（４）ゲストホスト型液晶(gh-LC) ··············································································（５）高分子分散型LCD(PDLCD、PNLCD) ································································（６）LCDPD(Liquid Crystal Dispersed Polymer Display)··············································（７）PDLCやPNLCDなどによる表示体の実例 ···························································（８）強誘電LCD(FLCD) ·····························································································
６.１．５ プラスチック基板における動画対応LCD開発 ·······································（１）反射型LCD(AM-LCD) ························································································（２）透過型・半透過型AM-LCD ·················································································（３）強誘電液晶表示体(FLCD) ··················································································
６.２ 有機EL表示体(OLED) ·······················································································
６.２．１ OLEDの市場 ································································································
６.２．２ ガラス基板による低分子系OLEDの開発 ················································（１）ガラス基板による低分子系大型OLED ·······························································（２）ガラス基板による低分子系OLEDを使った中小型用途 ······································
６.２．３ ガラス基板による高分子系OLEDの開発 ················································（１）高分子系有機EL材料を使ったOLED-TV ····························································（２）インクジェット(IJ)法による大型OLED ·····························································（３）ガラス基板による高分子系小型OLED ·······························································

－xiv－

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ガラス基板によるリン光材料OLEDの開発 ············································ 443
プラスチック基板での低分子系材料によるOLEDの開発 ···················· 444（１）最初のプラスチック基板OLED···········································································（２）O-TFTを使ったOLED ··························································································（３）エリアカラー方式のOLED ··················································································（４）フレキシブルOLED ·····························································································（５）転写法によるOLEDの製造 ··················································································（６）プラスチック基板と金属フォイル封止材を使ったOLED ··································
６.２．６ プラスチック基板での高分子系材料によるOLED(PLED)の開発 ·····（１）グラビア印刷法によるOLED ··············································································（２）IJ印刷法によるOLED ··························································································（３）a-酸化物TFTを使ったAM-OLED ·········································································（４）OTFTを使ったAM-OLED ····················································································（５）マルチフォトン構造の長寿命OLED ···································································
６.２．７ プラスチック基板でのリン光材料によるOLEDの開発 ························
６.２．８ OLEDのカラー表示構造 ············································································（１）三色塗り分け法とCFとの組み合わせ ·································································（２）色変換法(CCM) ··································································································（３）白色光源法 ··········································································································
６.２．９ 新規なOLED構造 ························································································（１）両面表示のOLED·································································································（２）シースルーなOLED(TOLED) ·············································································（３）ガラスファイバを使ったフレキシブルなOLED ·················································（４）多機能OLED電子ペーパー ··················································································
６.２．10
OLEDのまとめ ·························································································
６.３ 電子ペーパーディスプレイ(EP) ······································································
６.３．１ 主要用途における動き ···············································································（１）電子書籍 ··············································································································（２）電子新聞 ··············································································································（３）携帯端末 ··············································································································（４）その他の用途 ······································································································
６.３．２ 電気泳動方式の電子ペーパー① マイクロカプセル型電気泳動 ······（１）ローラブルな携帯端末 ························································································（２）電子ブック ··········································································································（３）携帯電話 ··············································································································（４）高精細表示 ··········································································································（５）大型カラー表示 ···································································································（６）セイコーエプソンのローラブルディスプレイ ···················································
６.３．３ 電気泳動方式の電子ペーパー② 垂直電気泳動方式電子ペーパー ··（１）SiPixの｢マイクロカップ｣ ···················································································（２）ザ ユニバーシティ オブ ブリティッシュ コロンビアの電気泳動方式 ···········
６.３．４ 電気泳動方式の電子ペーパー③ 水平電気泳動型(In-Plane方式) ···６.３．５ 電子粉流体 ···································································································
６.３．６ ツイストボール ···························································································（１）ツイストボールの製法 ························································································（２）その他のツイスト方式 ························································································

－xv－

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６.３．７
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６.３．９

トナーディスプレイ ··················································································· 468
エレクトロウェッティング ······································································· 468
エレクトロクロミック ··············································································· 469（１）3層タイプのカラー表示 ······················································································（２）新規なエレクトロクロミック材料 ·····································································
６.３．10 電解析出方式(エレクトロデポジション方式) ·····································
６.３．11 電子ペーパーのまとめ ·············································································（１）電子ペーパーの目標と課題 ················································································（２）電子ペーパーの各種システム ·············································································
６.４ 無機ELディスプレイ(ELD) ··············································································
６.５ 電界放出ディスプレイ(FED) ···········································································
６.６ プラズマディスプレイパネル(PDP) ·······························································
６.６．１ PDPの開発動向 ···························································································（１）軽量化、薄肉化 ···································································································（２）省電力化 ··············································································································
６.６．２ 曲げられるPDP(シート状のPDP)プラズマチューブアレイ ··············
６.６．３ PDPのプラスチック化 ···············································································
６.７ タッチパネル(TP) ······························································································
６.７．１ タッチパネルの種類と特徴 ·······································································
６.７．２ 抵抗膜方式(ART) ·······················································································
６.７．３ 静電容量結合(アナログ容量結合)方式(CAP) ······································
６.７．４ 超音波表面弾性波方式(SAW) ··································································
６.７．５ 赤外線方式(LED) ·······················································································
６.７．６ 新しい方式のタッチパネル ·······································································（１）振動検出方式(DST方式)·····················································································（２）音響波照合方式(APR方式) ·················································································
６.７．７ タッチパネルの新しい動き ·······································································（１）LCDとの一体化 ···································································································（２）表示体へのタッチパネル機能の取り付け ··························································（３）文字入力など ······································································································
６.７．８ タッチパネル用導電フィルム ···································································
６.７．９ タッチパネルメーカー ···············································································
６.８ プラスチック基板を用いたFPDのまとめ ·······················································（１）携帯端末 ··············································································································（２）据え置き型などの用途 ························································································（３）タッチパネル ······································································································

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参 考 文 献·························································································································· 492
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主要なプラスチック基板の特性－xvi－