TOKYO ELECTRON ANNUAL REPORT 2013

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CONTENTSCONTENTS

Financial Highlights

Business Overview

Top Message

Special Feature

Review of Operations
and Business Outlook

Corporate GovernanceCorporate CitizenshipIntellectual Property

Financial Section

Corporate Data

Environmental, Safety and Health Activities

Environmental, Safety and Health Activities
Tokyo Electron positions environmental, safety and health activi-

In procurement and logistics, we are promoting green procurementties as one of its most important management issues to achieve

and modal shifts. In environmental management, we will continue toboth sustained corporate growth and a sustainable society. The

obtain ISO 14001 certification for the Group’s plants, implement envi-

Group is committed to reducing the environmental impact of all its

ronmental education, and begin activities to protect biodiversity,activities, and to ensuring absolute safety in the Company’s facili-among other environmental activities.

ties and in those of its customers.

Example of efforts to reduce products’ environmental impact

gories were achieved. The overall amount of water used wasreduced by 6.4% from the previous year.

Single Wafer Cleaning System• Recycling of waste
Domestic plants and offices achieved the goal of recycling 97%

Recycling of Pure Wateror more of waste.

Waste fluid flow paths are divided into
those for recycling and those fordischarge to enable collection andrecycling of pure water.

nEnvironmental Activities

Cleaning
SystemTokyo Electron’s New Environment Vision
The Tokyo Electron Group has pursued activities at customers’ fac-

set by the six domestic plants and offices, the goals of five cate-III. Other• Tokyo Electron revised green procurement guidelines, conduct-Cleaning
Systemed web-based environmental training, and established guidelines concerning biodiversity.

tories, as well as within the Group itself, with the aim of reducing
environmental impacts by 50% over the baseline year of fiscal 2008

Collection

by the end of fiscal 2015. Because this goal was forecast to beDischarge

achieved ahead of schedule, in September 2012, we established aRecycling

In fiscal 2014, these activities will be expanded to Group companies overseas to continuously promote improvement activities.

Discharge

nSafety and Health Activities

new Environment Vision and set new environmental goals to expand
our scope of activities by making our efforts more multifaceted.

Results of the Fiscal 2013 Environmental Goals
The results of the first year under the new Environment Vision andTokyo Electron gives top priority to the safety and health not only

New Goals based on the New Environment Visionenvironmental goals are as follows.

to our employees but also our customers and partner companies

With the adoption of the new Environment Vision, we have set newand conducts various safety activities. The Company promotes  

environmental goals in the four areas of products, plants and offices,

I. Products

safety and health in all of its operations, including designing prod-

procurement and logistics, and environmental management. In prod-• Reducing environmental impact

ucts with an emphasis on safety and factories with considerationucts, we are aiming to reduce the power consumption of major mod-Against the goal of reducing power consumption of the major

for the environment.

els of each business unit by 50% and promote the environmental

models in each SPE business unit by 50% from the fiscal 2008

In fiscal 2013, Tokyo Electron reduced the number of work-

compliance of products. In plants and offices, we aim to reducelevels by the end of fiscal 2015, a 30% reduction in power con-place accidents by 20% compared with the previous year. Tokyo

energy and water consumption, and promote the recycling of waste.

Environmental
management

Procurement
and logistics

Plants and offices

ProductsAction

Medium- to long-term goals

Reduction of environmental
impactReduce power consumption of major models of each SPE business unit by 50% from the fiscal 2008 levelsby the end of fiscal 2015

Compatibility with Chinese RoHS

Continue to ensure product compatibility with the Chinese labeling standard

Compliance with environmental
regulations of each country

Continue to ensure product compliance with the EU’s Registration, Evaluation, Authorization and Restriction ofChemicals (REACH) framework as well as with labeling requirements based on the Globally Harmonized Systemof Classification and Labeling of Chemicals (GHS) and battery regulations of each country

Voluntary standard based on
the EU’s RoHS

Continue to ensure that major models of each SPE business unit contain 98.5% or more parts that meet theEU’s Restriction of the Use of Certain Hazardous Substances in Electrical and Electronic Equipment (RoHS)

Promotion of energy conservation

Reduce energy use by 1% on a per-unit basis from the fiscal 2012 level(Evaluate in a comprehensive manner based on a per-unit standard appropriate to the situation of each plantand office)Reduction of water consumption
Recycling of waste

Maintain the fiscal 2012 level(Evaluate in a comprehensive manner based on a per-unit standard appropriate to the situation of each plant)• Maintain a recycling rate of 97% or more
• Continue to achieve zero emissions

Green procurement• Continue to implement strict control over the use of chemical substances in equipment• Strengthen the link with suppliers’ environmental management systems

Reduction of environmental impact oflogistics• Promote a modal shift• Continue monitoring

Environmental management system

Continue to obtain ISO 14001 certification for the Group’s plants

Environmental education

Implement throughout the Group

Environmental communication

Continue to publish and enhance Environmental and Social Reports

Biodiversity

Start activities from fiscal 2014 upon investigation and examination

sumption was achieved for all such models.

Electron also carried out activities in line with its important goal of• Product environmental compliancepreventing accidents that could lead to serious injuries. As aIn addition to activities to reduce the use of hazardous sub-result, the number of such accidents was maintained at the samestances*, Tokyo Electron continued to assure compliance withlow level as fiscal 2012, half that of fiscal 2011. The Company

environmental regulations.

tenaciously continued to implement accident prevention mea-*In Japan, substances regulated in the Act on the Evaluation of Chemical Substances andRegulation of Their Manufacture, etc., the Industrial Safety and Health Act, and thePoisonous and Deleterious Substances Control Act.
Outside Japan, substances regulated by RoHS, REACH, etc.

sures such as prior checks of clean rooms before installing equipment, on-site risk prediction activities, safety patrols, and safety
education for workers based on accident case studies.
In 2013, Tokyo Electron will mark the 50th year of its founding.

II. Plants and Offices

The Company will take this chance to once again return to the• Reducing energy use by 1% on a per-unit basis in each area

starting point of Group’s “Safety First” policy, working to foster

Of the six domestic plants and offices that set goals for crude oilsafety culture, with the entire Company united in preventing work-

equivalent energy use reduction, five achieved their goals. The

place accidents and disasters.

overall amount of energy used was reduced by 6% from theprevious year.

For further details, see the “Tokyo Electron Environmental andThe Company’s CO 2 emissions as defined by scope 1 andSocial Report 2013” (to be published in September 2013).

scope 2 of the GHG Protocol were 141,007 tons.
• Reducing water use (maintain a per-unit basis in each area)
Of the six categories of goals (city water, industrial water, etc.)

Tokyo Electron’s Environmental Activities
http://www.tel.com/environment/enviro/product/index.htm

Tokyo Electron’s Safety and Health Activities
http://www.tel.com/environment/
stakeholder/health_safety/index.htm
Environmental and Social Report 2012
Technology Symposium

Practical safety training
in a clean room