Model 1402 Low Energy Ion Gun

Design Features·········

Focusing column optimized for low energy throughput
High brightness electron impact source for maximum bulk material removal
Emission regulated bombardment provides stable ion current with front panel
adjustable dynamic range x300
Continuously variable beam energy up to 5keV
Replaceable beam trimming aperture with typical life-time of > 500 hours
Dual filaments provide operational backup with typical filament life-time > 500 hours
All UHV compatible and etch resistant materials used in fabricationDifferential pumping to minimize main chamber gas loading
Operates over the range of inert gas species, Oxygen with optional Thoria filamentNonsequitur Technologies 20664 Carmen Loop #3 Bend, OR97702 Ph: 541-312-2410 Fax: 541-312-2412

Guaranteed Performance @ 20mm Working Distance, Argon Ions

EnergySpot Size

Beam Current

Current Density

8uA
5uA
4uA
2uA

4.0
1.1
0.50
0.25

(um FWHM)

3kV
1kV
500eV
100eV

400
750
1000
1000

(mA/cm2)

Model 1403 Ion Gun SchematicEngineering Specification
Working Distance:
Beam energy:
Raster Size:
Mounting Flange:
Differential Pumping:
Supply Gas Inlet:
Source gases:
Bake-out Temperature:

20 mm
10eV to 5keV continuously variable
7 x 7 mm (minimum)
70 mm (2.75in) O.D. CF
70 mm (2.75 in) O.D. CF
34 mm (1.33 in) O.D. CF
He, Ne, Ar, Kr, Xe
100 °C maximum

System Integration Details

Nonsequitur Technologies 20664 Carmen Loop #3 Bend, OR
97702 Ph: 541-312-2410 Fax: 541-312-2412

1402A Controller Features·······

Precise and stable lens voltages
Emission regulated electron impact supply
Front panel raster controls with external programmability
Power interlocks for safety and equipment protection
Remote On/Off control for automated operation from external equipment
Raster compensation electronics to correct for changes in sample geometry and working distanceComprehensive front panel system parameter monitoring

Controller Specification
Input Power:
Beam Energy:
Condenser Focus:

Objective Focus:
Filament Power:
Electron Bombardment
Ion Extraction:
Deflection:
Interlocks:

Front Panel Monitoring:

Chassis Dimensions:

115/230VAC 50/60Hz auto-select operation. Fused at 3.3/1.8A.
0 - 5000V, 1mA switch mode supply continuously variable.
Output capacitance: 0.0047mF.
0 - 1500V, 1mA switch mode supplies independently and continuously variablethrough front panel three position rotary switches and trim-pots. Output voltages
scale with energy. Output capacitance: 0.0047mF
0 - 5000V, 1mA switch mode supply continuously variable. Output voltage scaleswith energy. Output capacitance: 0.0047mF
Emission regulated supply with front panel selectable filaments providing 5V@
5A max.
Electron accelerating voltage internally adjustable to 150V.
Seven settings of electron emission current selectable from front panel rotary switch.
Internally adjustable to 1500V.
Variable bi-polar 350VDC supply for +X, -X, +Y and -Y deflection. Remaining
octupole elements are supplied from a resistive divider network.
HV cable disconnection turns off HV supplies.
Adjustable high pressure interlock switches off HV supplies in the event of system
overpressure.
System and Auxiliary interlocks provide total shutdown in the event of system or
auxiliary equipment failure.
Digital panel meters provide precision monitoring of all critical parameters including;lens voltages (41/2 digits), ion source pressure and beam current (31/2 digits), filamentcurrent and voltage (31/2 digits), emission current (3 1/2 digits).
483(W)x132.5(H)x435.4(D) mm. 19 inch rack-mountable desktop case 3U high.

Nonsequitur Technologies 20664 Carmen Loop #3 Bend, OR
97702 Ph: 541-312-2410 Fax: 541-312-2412

Typical Performance Data

Nonsequitur Technologies 20664 Carmen Loop #3 Bend, OR
97702 Ph: 541-312-2410 Fax: 541-312-2412