Tokyo Electron  Annual Report 2011

Environmental, Health and Safety Activities

Tokyo Electron’s corporate missions include placing the highest

cooperation with our customers and adjusting our approach topriority on people’s health and safety and taking the global environ-each ­product’s characteristics in a multi-faceted manner. We arement into account when conducting business activities.

actively implementing initiatives to achieve these goals. Furthermore, we are working to reduce the total environmental burden

Fundamental Policy

during product usage: not merely of our products, but also of theTokyo Electron positions environmental, health and safety activities

peripheral machinery owned by customers, as well as determining

as one of its most important management issues to achieve boththe optimal form of product usage.

sustained corporate growth and the continued development ofsociety. With that in mind, Tokyo Electron is committed to reducing

2. Initiatives Regarding Hazardous Substances in Products

the environmental impact of all its activities, and to ensuring abso-

As an environmental measure, Tokyo Electron promotes efforts tolute safety in the Company’s facilities and in those of its customers.

reduce hazardous chemical substances in its products. Chemical

In order to accelerate our environmental response activities, insubstances contained in the units and parts used in products areMay 2008 we codified Tokyo Electron’s environmental commitment,

managed in a dedicated database. Tokyo Electron has positioned

selecting “Technology for Eco Life” as a slogan to guide our envi-

those products in which at least 98.5% of the constituent partsronmental activities. One of the stipulated goals of this commitment

meet standards stipulated by the Europe RoHS directive* as “equip-is to develop production equipment that will enable customers toment containing reduced amounts of chemicals.” Shipment ofcut the total environmental burden of their factories in half bythese products first began in October 1, 2008.

2015, and also to cut the Company’s own environmental burden
from business activities and logistics in half by the same date. Moreover, to develop these environmental, health and safety initiatives,
we believe that it is vital to promote communication with all stakeholders as well as to receive and give feedback. In line with this* Refers to the “Restriction of the use of certain Hazardous Substances in Electrical andElectronic Equipment” directive in Europe (2002/95/EC) and amendments thereto. With theexception of certain applications excluded from its scope, this directive prohibits theinclusion of lead, mercury, cadmium, hexavalent chromium, PBB, and PBDE over a maximum
prescribed amount in products. (European Directive 2002/95/EC on the restriction of the useof certain hazardous substances in the manufacture of electrical and electronic equipment)

philosophy, we are also actively engaging in activities that contribute to society.

Health and Safety Activities
Tokyo Electron promotes health and safety in all of its operations. ThisEHS Management

includes giving top priority to the health and safety of our employees

Since 1997, Tokyo Electron has developed and implemented envi-and customers and designing products with safety in mind.

ronmental management systems based on ISO 14001 standards,

In fiscal 2011, the number of accidents and injuries, including

mainly for the plants conducting manufacturing operations, andthose requiring first-aid alone, rose year on year across the entire

obtained the relevant certification. Furthermore, to enhance theTokyo Electron Group, including overseas. The main reasons forworkability and effectiveness of the EHS Management System, we

this are judged to be increases in production and shortening ofare raising the level of the continuous audits that check the systemdelivery periods initiated in order to expedite the launch of prod-and its results. These audits are performed from various viewpoints:

ucts to the market. Moving forward, all of Tokyo Electron willfrom within the workplace or the Group, or by a third party.

unite in promoting activities to prevent accidents across the boardand maintain a safe environment at the workplace. Such activities

Initiatives to Reduce the Environmental
Burden of Products

will include the further strengthening of provision of safety educa-

Proactive Environmentally Conscious Product Designagement supervisors.

tion for workers, on-site safety measures, and site patrols by man-Tokyo Electron believes that the promotion of product designs
sensitive to the environment is vital. In particular, Tokyo Electron has

For further details, see “Environmental andpositioned promotion of energy conservation in its products, as wellSocial Report 2011” (to be published in Octo-

as the reduction and replacement of regulated hazardous chemi-ber 2011).

cals, as priority issues.

http://www.tel.com/eng/citizenship/ehsreport.htm

1. Initiatives to Reduce the Environmental Impact During
Equipment Usage

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Based on our roadmap for reducing the environmental burden of all

Tokyo Electron’s Commitment

business departments, we developed our approach to such policies

The Tokyo Electron Group has assessed the impact of its products

as reducing our energy requirements, and the industrial gases andon the environment throughout their entire lifecycle—from thechemical substances used. Doing so required working inprocurement of major components, through manufacturing andAnnual Report 2011

Tokyo Electronlogistics to product use. Based on this assessment, we establishedtimelines to provide more time for shipping, and to reduce thean environmental goal for the year 2015 and are promoting mea-

number of parts to reduce weight, along with increasing local

sures to reduce environmental impact.

production. We will continue to work with customers in halving our■ We aim to develop equipment that enables a 50% reduction—

logistics burden per ton-kilometer. At our manufacturing sites, wecompared to the 2007 levels—of the total environmental impact of

have continued to make environmental investments with the goal

new customer factories scheduled for completion in 2015.

of reducing CO2 emissions. In addition, we have taken concrete■ We aim to reduce the impact of our business and transportation

measures to conserve power in response to power consumption

activities on the environment by 50%, by 2015, compared to therestrictions following the Great East Japan Earthquake. As part of2007 levels.

these measures, we are speeding up plans to install solar power■ We will strive to achieve these commitments in partnership with ourstakeholders.

generation systems at the Yamanashi plant and the new Miyagi plant.
We have also instituted carbon offset initiatives based on Domestic
CDM (Clean Development Mechanism) as part of the plan to halve
emissions per unit of sales.
In recent years, it has become imperative to make significant
reductions in the amount of power mobile electronics like smart-Progress on Achieving Environmental Commitmentphones consume. We will continue to support the realization ofTokyo Electron has set a goal of achieving a 50% reduction of

more energy-efficient semiconductors and flat panel displays manu-per-unit CO2 emissions by 2015 compared with 2007. Already, we

factured using our equipment as a way to contribute to the CO2

have the potential to achieve this target in our products per 300mm

reduction efforts of society at large.

wafer unit produced. In terms of logistics, we are endeavoring toswitch shipment from air to marine freight for deliveries to customers.
To facilitate this switch, we are striving to shorten manufacturingCleaning System Initiatives
In addition to the high controllability required for miniaturizing andenhancing the performance of devices, the CELLESTATM+ single
wafer cleaning system enables a smaller footprint (installation area)with 12 spinners*1 by reducing the size of the process chambers.
Wafer spin chambers require spatter control of process liquids andatmosphere control, but the input and output of large amounts of
air are necessary to control these during high-speed spin processing.
The CELLESTATM+ uses the “rotational cup” concept, in which thespin chambers rotate in synchronization with the wafers. This provides
not only a 50% reduction in exhaust air compared with conventional systems but also enables downsizing of process chambers
and enhancing of productivity per unit area and C.o.O*2.
*1 Spinner: a device that creates thin films through centrifugal force by rapidly rotating
flat and smooth base materials.
*2 C.o.O (cost of ownership): total expenses required for installing, operating, andmanaging facilities/equipment, etc.

About 50% reduction inexhaust volume using
rotational cup

Conventional equipment

CELLESTATM+

Features of CELLESTATM+
1. High throughput: maximum 333 wafers/hour
2. New spinner model: 12 process spin chamber
3. Enables built-in chemical supply circulation unit
4. TEL original IPA drying technology enables watermark-free drying
5. New atomized spray (AS3) for high particle removal efficiency(PRE) with fine patterns and non-damaging cleaning
6. Utilizes the highly reliable CLEAN TRACK™ LITHIUS Pro™ coater/developer handling technology

Status of Tokyo Electron Group’s Environmental Initiatives
Organization dedicated to the environment

Corporate Environment Promotion Dept.

Highest responsibility for the environmentBoard of Directors and Board of Executive Officers

Environmental audits

Internal and external audits each conducted yearly; other irregular inter-Group audits

Introduction of environmental management systems

Acquired ISO 14001 at 8 plants and offices

Zero emissions of waste

Achieved at all domestic manufacturing bases; recycled products used in-house

Setting of energy conservation targets

Implementing energy-saving products and energy-saving targets at plants and offices

Environmental training for employees

Conducted for all employees

Punished for violating environmental regulations?

Tokyo Electron has never been punished for this17