Technical Data | June 2019PRELIMINARY

3M™ Trizact™ CMP Pad MRXXX Series
Developmental Status Notice
3M™ Trizact™ CMP Pad MRXXX Series is a 3M developmental product. It is currently available on a limited basis and is
only provided for market and technical evaluation. The future availability, formulation, performance properties, andpricing of the material are not guaranteed and are subject to change. To discuss your evaluation, please contact yourlocal 3M Technical Service.

Product Description
Note:

The data presented in this preliminary data sheet are 3M’s best estimates for the current product construction being
evaluated. While this product is being developed for general commercialization, this product is still considereddevelopmental at this time and changes in the product construction or process conditions may occur that can cause
subsequent changes in product characteristics or performance. User should consult with 3M before making any businessplans in reliance upon the future availability or the current properties of this product.

The 3M™ Trizact™ CMP Pad MRXXX series uses microreplication technology to provide precise asperity control for atunable pad texture and consistent pad performance throughout pad life.

Key Features•••

Precisely engineered three dimensional microreplicated asperities and pores to define the pad texture and help
ensure consistent performance pad-to-pad to meet the demands of advanced node CMP.
Asperities and pores are arranged into independent unit cells to enable uniform pressure across the wafer.
Highly controlled microreplication process delivers repeatable and tunable CMP pads.

Storage and Shelf Life
The shelf life of 3M™ Trizact™ CMP Pad MRXXXX series is 12 months from the date of manufacture when stored in theoriginal packaging materials and stored at 21°C (70°F) and 50% relative humidity.

Certificate of Analysis (COA)The 3M Certificate of Analysis (COA) for this product is established when the product is commercially available from3M. The commercially available product will have a COA specification established. The COA contains the 3M
specifications and test methods for the products performance limits that the product will be supplied against. The 3M
product is supplied to 3M COA test specifications and the COA test methods. Contact your local 3M representative forthis product’s COA.
This technical data sheet may contain preliminary data and may not match the COA specification limits and/or test
methods that may be used for COA purposes.
Final product specifications and testing methods will be outlined in the products Certificate of Analysis (COA) that isprovided once the product is approved by 3M for general commercialization and development work is completed.

3M™ Trizact™ CMP Pad MRXXXX Series

Safety Data Sheet: Consult Safety Data Sheet before use.
Experimental Product: This 3M product is an experimental or developmental product that has not been introduced orcommercialized for general sale, and its formulation, performance characteristics and other properties, specifications (if any),availability, and pricing are not guaranteed and are subject to change or withdrawal without notice.
Technical Information: The technical information, recommendations and other statements contained in this document are based
upon tests or experience that 3M believes are reliable, but the accuracy or completeness of such information is not guaranteed.
Product Use: Many factors beyond 3M’s control and uniquely within user’s knowledge and control can affect the use andperformance of a 3M product in a particular application. Given the variety of factors that can affect the use and performance of a3M product, user is solely responsible for evaluating the 3M product and determining whether it is fit for a particular purpose andsuitable for user’s method of application.
Warranty, Limited Remedy, and Disclaimer: This 3M product is sold or made available “AS IS”. 3M MAKES NO OTHERWARRANTIES OR CONDITIONS, EXPRESS OR IMPLIED, INCLUDING, BUT NOT LIMITED TO, ANY IMPLIED WARRANTY ORCONDITION OF MERCHANTABILITY OR FITNESS FOR A PARTICULAR PURPOSE OR ANY IMPLIED WARRANTY OR CONDITIONARISING OUT OF A COURSE OF DEALING, CUSTOM OR USAGE OF TRADE.
Limitation of Liability: Except where prohibited by law, 3M will not be liable for any loss or damage arising from the 3M product,whether direct, indirect, special, incidental or consequential, regardless of the legal theory asserted, including warranty, contract,negligence or strict liability.

Electronics Materials Solutions Division
3M Center, Building 224-3N-11
St. Paul, MN 55144-1000
1-800-251-8634 phone
1-651-778-4244 fax
www.3M.com/TrizactCMP

3M and Trizact are trademarks of 3MCompany.
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