SEMICONDUCTOR MARKET(Ultra) low flow
Coriolis competence

Source: ABBBronkhorst®

Bronkhorst® is a supplier to many of the world’s biggest andmost respected companies. Our Coriolis Mass Flow Meters andControllers can be used in various applications:

Bronkhorst® specializes in low flow Mass Flow Meters andControllers for liquids and gases. Our Coriolis principle based•

instruments are designed to accurately measure and control
flow ranges from 0.1 g/h up to 600 kg/h.
They are suitable for numerous applications withinsemiconductor, laboratory and chemical environments.
Combined with a (gear) pump or (shut-off) valve, compact
liquid mass flow dosing systems can be offered as an alternativeDosing and controlling supercritical fluids(e.g. Supercritical CO2 cleaning)•Deposition of protective layers on wafers before(laser-) dicing•

Spray coating in flat-panel displays (FPD)•Metal Organic Chemical Vapor Deposition (MOCVD)•

Atomic Layer Deposition (ALD).

to gravimetric or volumetric filling and dosing methods. All
instruments can be supplied with face seal fittings (VCR).

Customer firstBronkhorst® provides not only instruments, but also total flow
solutions. Our global perspective with local focus ensures that ourinternational distributor network is able to provide on-site supportand discuss the best solution to any given application. This ethos
also includes product adjustments to ensure that the finer detailsof your application will always be met with a bespoke solution ifnecessary.

Round the clock support
Bronkhorst® is a worldwide organization with
its Head Office located in Ruurlo, The Netherlands.
The Customer Service Department offers ‘seven days aweek’ support to customers in every corner of the world.
Our specialist teams are available to you to fulfill theneeds of pre- and aftersales support, on-site inspection& calibration and start-up assistanceThe innovating Semiconductor market
Due to faster and smaller semiconductor devices and higher levels of integration, a higher precision in theproduction process is required. To increase the wafer production process, new materials are being used.

Wafer Cleaning
Cleaning with supercritical CO2 will be the ‘next generation’ cleaning method as supercritical
CO2 has the following advantages:• Zero surface tension (no wafer damage)• A tunable density• Environmentally friendly (non toxic)• A recyclable process.
With regard to wafer cleaning, the Coriolis instruments of Bronkhorst® offer the following benefits:
A high accuracy (0.2% reading) and a great repeatablility
The (mini) CORI-FLOW™ sensors have an accuracy of 0.2% reading and a perfect repeatability, creating a constantendresult and highly stable flow control.
A quick response on start, stop and setpoint changes
The quick start/stop control in a (mini) CORI-FLOW™ saves expensive machine run-time as no long start-up time isneeded. Within seconds the flow is stable and accurate.
No calibration needed
A (mini) CORI-FLOW™ sensor does not need to be (re-)calibrated during a process or liquid change.
This results in saving machine run-time and service time which is needed during maintenance.

Layer Deposition
Performing (thin)film layer deposition is possible by several ways.
The two most common ways are Spray Coating and Chemical Vapor Deposition.
Spray Coating
Spray coating, the alternative for Spin Coating, is much more effective in applying a thin, uniform coated layer.
Other advantages of Spray Coating are:•	An improved throughput time by high-speed coating•	Better yield ratios as a result of a superior coating uniformity on (non round) surfaces

Source: Argonne National Laboratory•	No (re)calibration needed during the process.
Examples of well known processes that can be significantly improved using a Bronkhorst® (mini) CORI-FLOW™:
Laser dicing
Applying a very precise protection layer onto the surface with a (mini) CORI-FLOW™ protects the surface against debris(particles) and simplifies the cleaning of the wafer. This results in a higher quality, higher yield and less field returns.
FPD- and solar cell coatingThanks to precise dosing and quick start/stop time, a (mini) CORI-FLOW™ sensor will bring a nearly 100%efficiency in the use of coating materials during the production processes.

SEMICONDUCTOR MARKET

ChemicalVapor
Deposition
CEM: Controlled
Evaporation
Mixing (CVD)
CEM: Controlled Evaporation Mixing

u Fast evaporationu Precursor only short periodof time at higher temperatureu Well-suited for less stableprecursorsCarriergas
MFC

CEM

Vapor
VapourflowReactor

Liquidsourceu Pressure and temperature inpiping are of no importanceu Precursor dosing via liquidflow controlleru Precursor in a container at
low temperature

MFM
LIQUI-FLOW

There are several types of CVD processes in which a (mini) CORI-FLOW™ sensor is able to improve and simplify
the process significantly. Bronkhorst® instruments introduce the following benefits:• High accurate vapor flow control and excellent reproducibility• Excellent batch-upscaling• Fluid independent; no recalibration needed during the process.
To create a mixture of gases and liquids in a CVD process, bubblers are most commonly used. A Bronkhorst®
CEM system can replace the bubbler system eliminating the bubbler’s disadvantages. The advantages of a
CEM system in comparison with a regular bubbler are given in the overview below:

BubblerBronkhorst® CEM system

Temperature

Optimum Temperature needed

Temperature independent

Energy consumption (heating)High; liquid in container is heatedLow; heating at last stage before reactor

Pressure

Optimum Pressure needed

Pressure independentAccuracy

Low

Accurate: Liquid: 0.2% reading
Gas: 0.5% reading

On start/stop

Slow

QuickOn change

Slow

Quick(Long term) stability

Poor

Very stable

Waste

Decomposition by overheating

No wasteWorking temperature

High

Low

Fluid handling

One gas/liquid

Various gasses/liquids/mixtures

Reproducibility

Low

High

Response time

Metalorganic Chemical Vapor Deposition
Several metalorganic source fluids are used in the MOCVD process which can be mixed and controlled by a CEM system.
Atomic Layer Deposition
ALD is a process which offers thin film growth as fine as atomic/molecular scale per monolayer. In this process Bronkhorst® instruments canmake the difference. (mini) CORI-FLOW™ instruments for dosing precursors offering:• Excellent Reproducibility: < (0.1% +Zero Stability) variation over 24 hr• Quick dosing due to very fast response time: < 0.5 seconds• Liquid and gas independent: No (re-)calibration during operation or after fluid change.

How to reduce production costs byusing a (mini) CORI-FLOW™ controller
Using conventional mass flow instruments requires regular recalibration of the instruments toensure constant accuracy, especially when changing the fluids. If we look at Coriolis instruments,
we see that recalibration is not necessary. This can save a lot of costs. Figures below show anoverview of cost savings possible for flat panel display production:

Calculations based on the use of mini CORI-FLOW™ instruments
Calculation of the total savings possible by using a Bronkhorst Coriolis instrument (e.g. an ML120) based on:
1. Reduction of expensive fluid waste Save 5 gram of OLED material per 55’’ OLED display panel	The (mini) CORI-FLOW™ controllers can reduce the waste of materials by decreasing the flow to zero during stops, when nolayers are printed. The Coriolis sensors do not need any stabilization time (in contrast to competitor instruments) and theflow reaches the setpoint very fast again after the stop. An example of material savings per panel possible by reducing thefluid waste is in the illustration and tables below.
nozzles

40 seconds: zero flow

80 seconds: printing

Competitor MFC

mini CORI-FLOW™ MFC

2

Waste time1

40 sec2 sec

3Fluid flow e.g.2

80 mg/min = 1.33 mg/s

80 mg/min = 1.33 mg/s

Produced panels

11MFC’s (nozzles)3

100 pcs.

100 pcs.

80 mg/min: 5.32 g

80 mg/min: 0.266 g

Wasted liquid / panel
Savings / panel

Waste time (Total production time - EML print time =120s - 80s) = 40s
Calculated from layer thickness print time and panel area1)
Estimated from available data 1 MFC per nozzle

1	Actual HD display*

Example:*	Changing the parameters (e.g. fluid flow)
will give different results> 5 grams per panelAs the capacity of the OLED production equipment is 10,000 55” panels per month per machine, a reduction of 5 grams perpanel adds up to a total saving of 240 kg of OLED EML liquid per machine per year
Savings / panel

5 g/panel

Panels / year / machine

Approx. 120,000

Savings / year / machine

Up to 240 kg

2. No (re) calibration needed Savings because regular calibration is not needed:	Using conventional thermal mass flow instruments requires regular recalibration of the instruments to ensure constantaccuracy, especially when changing the fluids. If we look at Coriolis instruments, we see that recalibration is not necessary,as they work like inline weighing scales, independent of fluid properties. An overview of cost savings possible by reducing
machine down-time for calibration is shown below.
Competitor MFC

mini CORI-FLOW™ MFC

Machine down-time*

4 hrs/month

0 hrs/month

Savings

48 hours machine down time / per year

*Assumption: Machine down-time based on
1. (Re)Calibration of competitor MFC for:			 a. MFC Calibration. b. Recalibration after fluid change.
2. Machine switched-off for calibration.
3. 100 MFC per machine.

SEMICONDUCTOR MARKETThe benefits of (mini) CORI-FLOW™
Bronkhorst® Coriolis Mass Flow Meters and Controllers are known for their high accuracy, repeatability andemployability for multiple fluids. They behave like scales for flowing mass. Besides this they provide a fast
response and a capability to measure and optionally control very low flow rates. Looking specifically at thesemiconductor market, the benefits below are important.

Repeatability
During processes like wafer cleaning and layer deposition, the repeatability of the process has animportant role. The solutions of Bronkhorst® make sure the repeatability is constant and the quality
will be guaranteed. Features of Bronkhorst® solutions are:

• The (mini) CORI-FLOW™ sensor maintains a stable mass flow which is independent from pressure
and temperature changes in the process• Excellent accuracy to ensure an optimal process quality• Perfect repeatability to ensure that the process conditions are kept within strict limits.

One sensor, all fluids
Changing instrument combinations to perform various different process steps of applications
requires a sensor that is compatible with numerous different fluids. This feature is crucial to thesuccess of (mini) CORI-FLOW™ as without any changes to the sensor the user is indeed able touse the same instrument for multiple different process steps of applications. This will ensure:• Convenience to work with several fluids without changing the instrument• During the operation, no (re)calibatrion is needed. The sensor wil be calibrated
in our factory and will be ready for use.

Convenience of changeWith a (mini) CORI-FLOW™ it is possible to use the same sensor for
multiple processes. Simply configure the software settings andstart working. (mini) CORI-FLOW™ gives the following benefits:• Pumps, valves and sensors can easily be combined by the user•	Different tests require different setups. A (mini) CORI-FLOW™ isable to be applied to a whole host of different processes.

Bronkhorst® FlowWare,free software tools
For the convenience of their customers, Bronkhorst developed
various software tools, to support the operation of their digital
mass flow meters and controllers.

Typical functions•	Re-ranging mini CORI-FLOW™ instruments

These software tools are suitable for operation by personal

Coriolis instruments are very linear, therefore the instruments

computer and available free of charge.

can be rescaled at any desired value within the specifications ofthe instrument.

• Optimizing (PID) controller settings	The products of Bronkhorst® have an integrated PID controller.
Therefore it is possible to control valves and pumps directly.
With FlowPlot it is possible to optimize these setting to your›

FlowDDEInterface between digital instruments and Windowssoftware.

personal preferences. In addition it is also possible to save yourpersonal preferences. This can be very useful if you would like to
use one MFC for several processes.

• Printing a hardcopy of graphs

Share your results with colleagues and/or customers.

›FlowView• Data logging to comma separated files	
All parameters can be logged, therefore you will have an

FlowView is an application to easily operate Bronkhorst®

excellent traceability of your process. This is very useful when it

digital instruments and readout units (E-8000 series).

comes to quality assurance.

›FlowPlot• Batch counter settings	The Bronkhorst® Coriolis instruments are equipped with theCORI-FILL™ technology. With the integrated counter function

Software tool for monitoring and optimizing digital

it is possible to perform highly accurate batch dosages. Theinstruments.

counter function also ensures that the actuator will react•	Free software program for monitoring and service purposes onBronkhorst® digital instruments and readout units•	Good insight into the dynamic behaviour of meters andcontrollers and thus the process•	Allows adjustment of the controller, alarm and counter settings•	FlowPlot has benefitted a great many users when firstestablishing a new experiment or process. The graphicalrepresentation of so many measured parameterssimultaneously, e.g. flow, temperature, density, etc is a usefulvisual tool at the point of set-up.		

as soon as the batch has been reached. Normally several
components would be needed to achieve this. By using
CORI-FILL™ you will have this functionality in one component,in one assembly and from one supplier, without the need ofcomplex programming of additional hardware.

This screen shows theselected parametervalue sizes as afunction of the timeto get am impressionof the dynamic flow(and other parameter)
behavior.

Density (100% = 2000 kg/m3 - 0% - 0 kg/m3)
Temperature (percentage = ⁰C)
Setpoint (wanted value; 100% = FS = capacity)
Measure (actual flow; 100% = FS = capacity)
Controller output value								SEMICONDUCTOR MARKET

Bronkhorst® Fluidics Handling Solutions for the Semicon Market

Coriolis Mass Flow Meters and Controllers
Precise and compact Mass Flow Controllers (MFCs) for gases and liquids, based on the Coriolis
measuring principle, designed to cover the needs of the low flow market. The MFCs offer“multirange” functionality: factory calibrated ranges can be rescaled by the user, maintaining
the original accuracy specs. Standard digital communication over RS232, optional fieldbus
communication: PROFIBUS DP, DeviceNet™, Modbus-RTU, FLOW-BUS. On ML120 series also
PROFINET and EtherCAT®.

Thermal Mass Flow Meters and Controllers
Metal sealed Mass Flow Controllers (MFCs) for gases, for use in high purity applications. The MFCsoffer “multi fluid / multi range” functionality: factory calibrations can be modified by the user withthe aid of free configuration software. Standard digital communication over RS232, optional fieldbus
communication: PROFIBUS DP, DeviceNet™, Modbus-RTU, FLOW-BUS, PROFINET and EtherCAT®.

Digital Pressure Meters and Controllers
Digital Pressure Meters and Controllers for gases and liquids, for use in high purity applications.
Metal Seal Pressure Meters and Controllers of Bronkhorst® are characterised by their unique,patented metal-to-metal seal construction with excellent resealing capability. Standard digitalcommunication over RS232, optional fieldbus communication: PROFIBUS DP, DeviceNet™,Modbus-RTU, FLOW-BUS, PROFINET and EtherCAT®.

Vapour Delivery Solutions
A Bronkhorst vapor generation system consists of a (thermal or Coriolis) liquid flow controller,
an MFC for carrier gas and a temperature controlled mixing and evaporation device. As anoption, these components can be integrated in a pre-tested, safe and ready to use Vapor
Delivery Module (VDM). This module can generate (saturated) vapor flows within the rangeof 100 mln/min up to 10 ln/min and features integrated power supply with display (1.8” TFT)
and control functions. As an option, the unit offers local or remote trace heating temperature
control. The VDM-Series can be applied for atmospheric or vacuum processes and is capable ofevaporating mixtures and even solids, dissolved in solvents.

Bronkhorst High-Tech B.V.
Nijverheidsstraat 1A
7261 AK Ruurlo
The Netherlands
T +31(0)573 45 88 00
I www.bronkhorst.com
E info@bronkhorst.com

9.60.055E©Bht-T163432

F +31(0)573 45 88 08