Ｃｌｅａｎｎｅｓｓ ｂｙ Ｐｕｒｐｏｓｅ

D iaphragmValves"High Flow Diaphragm Valves"

HFD series

IHARA SCIENCE CORPORATION

HFD Large Flow Metal Diaphragm Seal Valve【Features】

HFD Series Large Flow Metal Diaphragm Seal Valve is a valve that can handle a large flow rate with excellent cleanliness.
While ensuring the same level of airtightness as conventional metal diaphragm valves, an increase in the amount ofopen/close lift and optimization have resulted in a smooth flow path and a large flow rate. The open/close status can bechecked at a glance with the open/close display function.
■ Large flow rate is achieved by increasing the flow path to the maximum■ Less dead space in the gas contact area and excellent gas substitution and cleanliness■ High airtightness due to diaphragm seal
■ Oil-proof Treatment through Precise Cleaning of Gas-contact Parts

Specifications
Body

1/2"Base

Connection size

1/2"1"Base

3/4"

3/4"

（※1)

Vac.～1MPa

Working temperature-10～+80℃

Working pressure

Cv（※2)

2.8

2.8

5

Connecting joint （※3)

1"VTF (metal gasket joint)
Tube

Weight (※4) 640g

880g

He leak testing(external)
1×10-11 Pa･m3/s(internal)
3×10-10 Pa･m3/s

91350g(※1)

Special specs that can be used up to 1.7MPa are also available.

(※3) Other connections are also available.

(※2)

The actual flow rate depends on the connection piping.

(※4) Value for VTF (female) connections

1500g

Main materials
Part name

①②
③④
⑤⑥

Material

Body (1/2")

316L SS

Body (3/4" to 1")

SCS16A/CF3M

Sheet

PCTFE

Diaphragm

Co-Ni Alloy

Drive stem

304 SSBonnet

304 SSHandle

PA66

Size 1/2"Size 1"

[1]Indication of model number (size 1/2")

HFD - 8 ① - ②

HFD 1/2"e.g. HFD-8VF-EP[3/8"&1/2"VTF female connection Electropolished]

HFD - 8 ① - ② - ③ 831 - ④

HFD 1/2"
With purge port

e.g. HFD-8VM-EP-IOPP831-GD4[1/2" tube X 3/8 '' & 1/2 VTF male-connected electro-polished IN/OUT purge port 1/4'' VTF male connection]

HFD - 12 ①(8) - ②

HFD 3/4"

e.g. HFD - 12VFVM(8) - EP
[3/4"VTF female connection×VTF male connection EP]①
Symbol Connection

VFVTF (female)

VM VTF (male)TW

Tube②Symbol

EP

Inner surface treatment
Electropolished (≦Ra0. 18μm)

BA Machine processing (≦Ra0.8μm)③④Symbol Purge port position

Symbol Purge Port Connection Closure CapIOPP

IN/OUT end

IPP

IN sideOPPOUT end(blank)
GD4
GD4N-VTCA41/4" (male)*1/4" and 3/8" connections are also available. (Body = 1/2")*Inquire for further details.
[1] Dimension table (1/2'' base)

HFD-8VF

HFD-8VM

HFD-8

HFD-8TW

HFD-12VF(8)(mm)

ModelSize

LHHWHFD-8VF

1/2"

94

70

14.2

53

HFD-8VM

1/2" 12970

14.2

53

HFD-8TW

1/2" 114

70

14.2

53

HFD-12VM(8)(mm)

HFD-12(8)HFD-12TW(8)HFDIOPP831

ModelSize

LHhW

HFD-12VF(8)3/4"137

70

14.2

53

HFD-12VM(8)3/4" 167.4

70

14.2

53

HFD-12TW(8)3/4" 114.5

70

14.2

53

*If you wish to have a closing cap on the purge port,
Add "N" to the end of the model.
e.g. HFD-8 TW-EP-IOPP 831-GD 4 N

[2] Indication of model number (size 1")

HFD - Y - 16 ① - ②

HFD 1"

e.g. HFD - Y - 16VF - EP
[1"VTF female connection Electropolished]

HFD 1"
パージポート付

HFD - Y - 16 ① - ② - ③ - ④e.g. HFD - Y - 16TWVM - BA - IOPP - GD4[1" tube×1"VTF c Machine processing IN&OUT purge port (1/4"VTF male)]

HFD - Y - 12 ①(16) - ②

HFD 3/4"

e.g. HFD - Y - 12VFVM(16) - EP
[3/4"VTF female connection×VTF male connection Electropolished]①②

Sy mbol Connection

SymbolInner surface treatment

VF

VTF (female)

EP

Electropolished (≦Ra0. 18μm)

VM

VTF (male)BA

Machine processing (≦Ra0.8μm)

TW

Tube

*Inquire for further details.

[2] Dimension table (1'' base)③④Symbol Purge portnone(blank)
IOPP IN/OUT end
IN sideIPP
OPP OUT side

Symbol Purge Port Connection Closure Cap(blank)
GD4
GD4N

SymbolInner surface treatment

EP

Electropolished (≦Ra0. 18μm)

1/4" (male)

HFD-Y-16

HFD-Y-VF(mm)

Model

Size

LHhW

HFD-Y-16VF

1"

199

85

1663

HFD-Y-16VM

1"

209

85

1663

HFD-Y-16TW

1"

199.5851663

HFD-Y-12(16)HFD-Y-VM
Model

HFD-Y-TW

VTCA4(mm)

Size

LHhW

HFD-Y-12VF(16) 3/4"

230

85

1663

HFD-Y-12VM(16) 3/4"

239

85

1663

HFD-Y-12TW(16) 3/4" 209.5

85

1663

HFD-Y-IOPP
IN size
Purge PortOUT size
Purge Port**If you wish to have a closing cap on the purge port,
Add "N" to the end of the model.
E.g. HFD-Y-16TW-EP-IOPP-GD4N

shut-off valve

Purge port position and dimensions

ISO9001/ISO14001 certified sites[East Japan Sales Office] 〒108-0074[West Japan Sales Office] 〒530-0044

3-11-3 Takanawa, Minato-ku, Tokyo (Ihara Takanawa Building)

4F, Minamimorimachi Building, Higashitenman 2-6-5 IS, Kita-ku, Osaka

TEL:03-6721-6981 FAX:03-6721-6991

TEL06-6358-9255 (cost) FAX06-6358-9260[Chubu Sales Office] 〒460-0012
3-14-19, Chiyoda, Naka-ku, Nagoya[Overseas Sales Bases]

TEL052-323-2627 (cost) FAX052-323-2630

Taiwan: Taichung, China: Nantong, Korea: Seoul, USA: California

NoteImproper selection or handling of joints, valves, andrelated accessories can result in personal injury or damage
to the system.
Based on the responsibility and authority of the systemdesigner and user, select fittings, valves, and related
accessories, and perform appropriate installation, operation,and maintenance in consideration of the compatibility withthe system used and the operating conditions.
Before using the product, read the instruction manual andunderstand the contents thoroughly. If you do not have theinstruction manual available, or if you have any questions,please contact the nearest business department or salesdepartment.

Warranty Period
1.Warranty Period
The warranty period for our products shall be within one year from the start of use or 1.5
years from the date of delivery, whichever comes first. Provided, however, that thisprovision shall not apply when the product is a special specification or is used in a statethat deviates from our design specifications.
Also, the number of durability and replacement parts may be specified for some products.
Please consult our nearest sales office.
2.Scope of warranty
For any failure or damage reported within the warranty period which is clearly ourresponsibility, a replacement product or necessary parts will be provided without charge.
The warranty herein shall mean the warranty of our products alone, and any damage
caused by the failure or damage to our products shall be deemed to be caused by suchdamage.
We will exclude you from the scope of the warranty.

■URL：https://www.ihara-sc.co.jp■Please note that the contents of this catalog are subject to change without prior notice due to product improvements.
CAT No.136R2