Processing Unit
HIP - 1200
(Subject : Ver.1.21 ~ )User's Manual- 5.1th edition -Suruga Seiki Co., Ltd.

SG10-0069-001
Thank you for choosing Suruga Seiki's product. This manual has been written for the operation of Processing Unit
PRO HIP-1200. For proper use, please read this user's manual thoroughly prior to using this product and keep it
for future reference.
●Cautions for Your Safety
For proper and effective use, please read this manual thoroughly prior to using this product.
Failure to use the product properly as explained in the manual may cause damage or injury. The sign
indicates prohibited actions.
！

Cautions

・Safety & Proper Operation
・This product is connected to Laser Auto Collimator. Therefore, an operator of this product should haveknowledge of handling laser equipment safety.
・Wiring・ When connecting or disconnecting a cable, turn off the power of this product and any instrument
connected to the product. Otherwise, it may cause damage to the product.
・ Make sure to arrange wiring of I/O connector correctly. Otherwise, it may cause damage to the product.
・ Make sure to insulate this product to prevent electric shock.
・Operating Environment
Do not use the product in the following environments:−Directly under sunlight−Areas that have much dust or metallic particles−Near fire
−Much noise, much vibration−Areas that may have water or oil spill−Not flat surface−Corrosive gas and/or flammable gas environment
・Disassembling/Alteration
DO NOT disassemble, alter, or perform any improper repair of this product.
It may cause electric shock. If you have any question trouble, please contact us.
・Repair Request
In case of the following conditions, please unplug a power cable immediately and contact us for repair
request. If the product is continuously used, it may cause fire, electric shock or injury.
−Strange sound or smell or smoke coming out of the product−Power cable is damaged−Water is spilled over or foreign particle got inside the product−Product was dropped or cabinet was damaged

1

SG10-0069-001

ＩＮＤＥＸ
1. INTRODUCTION...................................................................................................................4
1.1 PROCESSING FUNCTION ................................................................................................................................................................ 4
1.2 PRINCIPLE OF MEASUREMENT USING A LASER AUTO COLLIMATOR ........................................................ 7

2. PREPARATION ...................................................................................................................122.1. ASSEMBLING...................................................................................................................................................................................... 122.2. CONNECTIONS.................................................................................................................................................................................. 15
2.3. POWER ON...................................................................................................................................................................................... 172.4. MAIN SCREEN ................................................................................................................................................................................... 18

3. SYSTEM SETTING...........................................................................................................193.1. NEW SETTING (SYSTEM SETTING)................................................................................................................................... 19
3.2. SETTING SCREEN & CONTENTS ........................................................................................................................................ 21
3.3. BINARY................................................................................................................................................................................................ 223.4. CALIBRATE.................................................................................................................................................................................... 23
3.5. ROTATION....................................................................................................................................................................................... 23
3.6. MIRRORING..................................................................................................................................................................................... 24
3.7. DISPLAY............................................................................................................................................................................................. 25
3.8. UNIT........................................................................................................................................................................................................ 25
3.9. COM........................................................................................................................................................................................................ 25
3.10. DATA OUT.................................................................................................................................................................................. 26
3.11. KEY LOCK................................................................................................................................................................................... 26
3.12. REMOTE ........................................................................................................................................................................................ 27
3.13. SAVE................................................................................................................................................................................................. 27

4. ANGLE MEASUREMENT ...........................................................................................28
4.1. SINGLE MEASUREMENT BASIC FUNCTIONS.......................................................................................................... 28
4.2. MULTI (RELATIVE) MEASUREMENT BASIC FUNCTIONS [MULTI R.].................................................. 30
4.3. MULTI (ABSOLUTE) MEASUREMENT BASIC FUNCTIONS [MULTI A.].............................................. 31
4.4. OFFSET TILT MEASUREMENT BASIC FUNCTIONS.......................................................................................... 32

5. ANGLE MEASUREMENT SETTING ...................................................................33
5.1. ANGLE MEASUREMENT USAGE......................................................................................................................................... 33
5.2. SETTING SCREEN & CONTENTS ........................................................................................................................................ 35
5.3. ZERO SET ........................................................................................................................................................................................ 36
5.4. ZERO RESET................................................................................................................................................................................. 37
5.5. MODE.................................................................................................................................................................................................... 37
5.6. LABEL SEL...................................................................................................................................................................................... 43
5.7. NUMBERING.................................................................................................................................................................................. 47
5.8. TOLERANCE................................................................................................................................................................................. 47
5.9. AVERAGE........................................................................................................................................................................................ 50
5.10. ZOOM................................................................................................................................................................................................ 51
5.11. LOAD................................................................................................................................................................................................. 53
5.12. SAVE................................................................................................................................................................................................. 532

SG10-0069-001

6. RUNOUT MEASUREMENT .......................................................................................54
6.1. RUNOUT MEASUREMENT BASIC FUNCTIONS.......................................................................................................... 54

7. RUNOUT MEASUREMENT SETTING ...............................................................55
7.1. RUNOUT MEASUREMENT USAGE..................................................................................................................................... 55
7.2. SETTING SCREEN & CONTENTS ........................................................................................................................................ 57
7.3. ZERO SET ........................................................................................................................................................................................ 58
7.4. ZERO RESET................................................................................................................................................................................. 59
7.5. SAMPLE............................................................................................................................................................................................. 59
7.6. BINARY................................................................................................................................................................................................ 60
7.7. CALC MODE.................................................................................................................................................................................. 61
7.8. TOLERANCE................................................................................................................................................................................. 61
7.9. WIDTH................................................................................................................................................................................................... 63
7.10. LOAD................................................................................................................................................................................................. 64
7.11. SAVE................................................................................................................................................................................................. 64

8. 3 BEAM MEASUREMENT ..........................................................................................65
8.1. SUB-BEAM TILT ANGLE MEASUREMENT BASIC FUNCTIONS......................................................................... 65
8.2. MAIN BEAM MEASUREMENT BASIC FUNCTIONS ..................................................................................................... 66

9. 3BEAM MEASUREMENT SETTING....................................................................67
9.1. 3BEAM MEASUREMENT USAGE..................................................................................................................................... 67
9.2. SETTING SCREEN & CONTENTS ........................................................................................................................................ 69
9.3. ZERO SET ........................................................................................................................................................................................ 70
9.4. ZERO RESET................................................................................................................................................................................. 71
9.5. THRESHOLD ................................................................................................................................................................................ 71
9.6. NOIZE CHK...................................................................................................................................................................................... 72
9.7. TOLERANCE................................................................................................................................................................................. 73
9.8. Θ ANGLE............................................................................................................................................................................................ 74
9.9. LOAD..................................................................................................................................................................................................... 75
9.10. SAVE................................................................................................................................................................................................. 75

10. ANGLE CALIBRATION..............................................................................................76
10.1. ABOUT ANGLE CALIBRATION .......................................................................................................................................... 76
10.2 FLOW OF ANGLE CALIBRATION ....................................................................................................................................... 77
10.3. CALIBRATION MENU (SYSTEM-CALIBRATE).............................................................................................. 78

11. ERROR MESSAGE.........................................................................................................82
12. EXTERNAL CONTROL..............................................................................................83
12.1. SERIAL INTERFACE .................................................................................................................................................................... 83
12.2. COMMUNICATION COMMANDS........................................................................................................................................ 85
12.3 COMMUNICATION FORMAT ..................................................................................................................................................... 86
12.4. DATA COLLECTION SOFTWARE.................................................................................................................................103
12.5. I/O......................................................................................................................................................................................................104

13. TROUBLESHOOTING ............................................................................................1063

SG10-0069-001

1. INTRODUCTION
1.1 Processing Function
The HIP-1200 Processing Unit receives and digitally processes the signals from Suruga Seiki’s Auto Collimator,and displays the detected angles and the result of acceptance range on an external monitor screen.
The unit has “angle measurement,” “runout measurement” and “3 BEAM measurement” functions. The resultsof measurement can be transferred to a personal computer.
Connected Image Chart
MonitorMonitor
cable

PWR

connect

BNC Cable

Connect cable to
VIDEO OUT
I/O
Cable
I/OCable
Supplied
Suppliedby customerby
C
PC

Laser Auto Collimator(Optional)

RS-232C Cross Cable
Supplied by Customer
Auto Collimetor
Connect to LAC connector

HIP-1200
Processor unit

4

SG10-0069-001･Feature
There are 3 kinds of centroid analysis at when measure the angle.（Center of area, Luminance Centroid,
Luminance Peak）
Improved MultiPoint measurement function.
Rotation（Switch ＸＹ coordinates）Mirroring／Offset judgment（Setting can be changed for subtle difference of setting and operation direction）
Include Command control by serial communication as standard equipment.
〜 Good for process that need MultiSpot measurement 〜¾Digital Camera／Cell Phone Camera Module／Vehicle video system¾Optical Disk Drive

3 BEAM Unit

RunoutMeasurement
New MultiSpot is excellent for
New MultiSpot is excellent for
Parallel Control between two The Measurement Tilt of Image Sensor
Optical Elements

New MultiSpot is excellent for
Parallel Control between Image
Sensor and Optical Elements

Runout Measurement and New Offset is excellent tocontrol Main or Sub Axis of Optical Disk Drive¾Optical PickupCLBlu-ray and CD/DVD
New MultiSpot is excellent for2 Beam Mirror Control

Blu-ray and CD/DVD
New MultiSpot and Offset function are
excellent for 2 Pickup Lens adjustment

5

PBS

2λLD

2 λLD
New Offset function is excellent tocontrol Optical Axis and Rotation

Ｇｒａｔｉｎｇ

Grating Rotation Control
New Feature 3 BEAM is excellent
for Measurement

SG10-0069-001･Specification
Item
Image output signal
Operation environment
Power consumption
Parallel I/O
Communication port
Size
WeightSpecification
NTSC color image signal (BNC)
0〜40°C, 20〜80%RH (no condensation)
DC12V １A
Insulated type I/O, in:3port, out:1port
RS-232C (D-SUB 9-pin)
W160 × H50 × D105mm (including the rubber legs of 9mm)
600g

*Appearance and specifications of this product are subject to change for upgrade without advance notice.

･Function list
Function

Old Version

The ProductAngle Measurement

Single Spot○○

（Standard Measurement

Multi Spot○○

（Lavel ordering）（Detection Ordering）（Size Number／Angle Ordering）

Runout Measurement○○

DCTilt Measurement（Actuator Tilt）

×○

3 BEAM Measurement（Greating Rotation

×○Center of area○○

Luminance centroid○○

Luminance peak×○

Display the luminance value

×○

Zoom function

×
×

○
○

Function）

Angle Measurement（Precision Motor Deflection Measurement）（Application Function）

Control）

Angle Analysis

User-Friendly Function（Switch XY axis）

Inverting image

×

○

○

○

Range of Acceptance

CircleSquare（Rad/Tan）○○

Judgment of Acceptance

Offset Judgment

×○

Judgment Condition

MultiSpot Selected points
MultiSpot All points

×
×

○
○

I／O Points
Input Function1 Zero Set

8/8

3/1

○

○

Input Function２ Data Output○○

Judgment of Acceptance

Parallel I/O

Serial Communication

Input Function３
Output Function
Interface○（Due to each function）○（Due to each function）

Judgment of Acceptance
RS-232C

Judgment of Acceptance
RS-232C

Command Control○○

CSV Style

CSV Style

Data Output

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SG10-0069-001

1.2 Principle of Measurement Using a Laser Auto Collimator
Light emitted from the semiconductor laser is transformed into parallel laser light by the collimating lens. The
laser light that is reflected by the half-mirror back to reflect to object, then collected by collective lens, and focused
onto CCD that set on focal length.
Can be measuring object tilt according to get the length of focus point on the CCD.

CCD
受光素子（CCD）

Collective
lens
集光レンズ

Semiconductor laserLD(Laser Diode)Half-mirror
ハーフミラー

コリメートレンズ
Collimating lensObjectof measurement
測定対象物

7

LD
半導体レーザSG10-0069-001

1.2.1. Principles of Reflection and External Incidence Measurements
In reflection measurement using a common internal laser light source, the optical axis of the reflected light isentered into an autocollimator in double tilt of θa/
In an autocollimator, θa that adjusts tilt of the laser of this 2Xθa a half is displayed as a tilt angle of themeasurement object. When measuring the tilt of external laser light source, should be display the angle ofincidence of the laser (θb) as a measurement angle. Therefore it must be setup refrection measurement orexternal incident measurement. (see “1.2.2 Switching to External Incidence Measurement” below).

θa θa

θb

θa

θb

Measurement with an internal

Measurement with an external

1.2.2. Switching to External Incidence Measurement
Turn power off. Locate the DIP switch in back of the unit and set No.3 pin to ON and all other pins to OFF. The
unit will start in external incidence measurement mode when it is turned on.
１）DIP switch
1
2
3
4
OFF

ON
OFF OFF ON OFF(Note)
・No.3 pin sets OFF for shipment.
・When the calibration is performed, return the DIP switch and checked with internal light source.
See “10. Angle Calibration” for detailed information.

8

SG10-0069-001

1.2.3. Screens in External Incidence Measurement Mode･Measurement screen
ANGLE‑S

OK“EXT” displayed while in external incidence mode
EXT
deg
X=+0.802
Y=‑0.783
D= 1.121

Results are shown in values twice thosefrom internal light source mode

Measurement screen(Note)
・Serial input data format is no different between internal and external light source

9SG10-0069-001･Accessories & Options
This Product comes with the following accessories. Please check if everything is included.
・AC adapter
1・Laser Auto Collimator - HIP-1200 Video Cable
1（model：HIP-1200C）
・User's Manual
1

Accessory detailed
1)AC adapter
Size ：
Weight：120g
Rating：AC100〜240V
DC12V 1A or more

2)Laser Auto Collimator - HIP-1200 Video Cable(model：HIP-1200C)
Size ：1.5m
Weight：80g3)User's Manual
Size ：A4
Weight：240g

10SG10-0069-001

The following option items are available to meet your needs. Please contact us for purchasing option items.
Product
Model
Note
Laser Auto Collimator Small type with red LD
H350R-C□□□ Measuring Range ±0.5°~ ±1.0°
H350B-C□□□ Measuring Range ±0.5°~ ±1.0°
Small type with blue LD
H400-C□□□
Measuring Range ±0.5°~ ±2.0°
With red LD
H400-C□□□S
Measuring Range ±0.16°~ ±0.35°
With red LD and screen
H450R-C□□□ Measuring Range ±0.5°~ ±1.5°
V-type LAC with red LD
H450B-C□□□ Measuring Range ±0.5°~ ±1.5°
V-type LAC with blue LD
H600-C□□□S
Measuring Range ±0.2°, ±0.3°
For 2 wavelength (with screen)
H600B-C□□□S Measuring Range ±0.2°, ±0.3°
For 2 wavelength with red and blue LDs
2-axes Tilt Stage
HB10
For H400-C, H350
HB11
For H400-CS, H450, H600-CS
Mount
HA10
HA11N
High Stiffness Type
Parallel Mirror
HS-0φ30, t=10, One side AL coating
Parallelism less than 5arcsec.
Wedged Substrate
1°(60 arcmin)
HS-1000.5° (30 arcmin)HS-050□40，t=10
0.25°(15 arcmin)
HS-025Angle accuracy less than ±10arcsec.
0.2° (12 arcmin)
HS-020HS-0100.1° (6 arcmin)
Wedged Mirror
1°(60 arcmin)
HS-100AL
0.5° (30 arcmin)HS-050AL□40，t=10
0.25°(15 arcmin)
HS-025AL
Angle accuracy less than ±10arcsec.
0.2° (12 arcmin)
HS-020AL
AL+MgF2
HS-010AL
0.1° (6arcmin)
Monitor
VCM-562W

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SG10-0069-001

2. PREPARATIONThis manual assumes the use of Suruga Seiki’s Laser Autocollimator (H400 series), 2-axes tilt stage (HB10)
and parallel mirror (HS-0). Set those or other units as instructed below.

2.1. Assembling
Attach the Laser Auto Collimator to the 2-axes tilt stage (HB10) and mount the parallel mirror (HS-0). Keep the
distance between the laser output of the Laser Auto Collimator and the parallel mirror (HS-0) to the work
distance of the Laser Auto Collimator heads (as shown below).

Laser Auto Collimator
2-axes Tilt Stage (HB10)

Parallel Mirror
Up to the work
distance of theLaser Auto
Collimator heads

Installation
Refer to the following pages about the detailed method of assembling the stand and the tilt stage (ifapplicable).

12

SG10-0069-001
・2.1.1 Assembling method
Screw on the tilt stage to stand.

Screw the tilt stage with attachedscrews.

The tilt stage may be installed horizontally. In that case, place it in such a way the flat surface of the opposing knob
seats is below the tapered surface as shown (along the direction of spring tension).
Tapered surface

Flat surface

Direction ofspring tension
Screw the autocollimator with attached screws.

Screw the autocollimatorwith attached screws.

Can be controlled θX, θY and θZ with tilt stage. Also control θX, θY with right and left knob, center
nob can be controlled θZ. Clamp the tilt stage with squeezing the front knob in tapered side.(see next page)13

SG10-0069-001

Knob used for adjusting θX and θY

Knob used for clamping

Knob used for adjusting θZ
2.1.2 Adjusting method
1) Adjust the detected light to the desired position by rotating the right and left knobs (θX, θY) and the middle
knob (θZ).
2) Retighten the right and left knobs as needed for clamping.
3) Finally, retighten the middle knob (θZ) as needed for pressurizing.

2) Retighten the clamping knob as needed to determine
the horizontal and vertical positions.

3) After clamping, retighten the middle
knob (θZ) as needed for pressurizing.

14

SG10-0069-001

2.2. Connections
2.2.1. Names of Components & Functions

Back Panel

Front Panel
(a)

No.

(b)

(c)

(d)

(e)

（ｆ） （g）

（h）

(m)

(l)

Name

（i）

（ｊ）

(k)

Function(a)Power Switch

Switch to turn on or off the power(b)[MENU] Key

Switch the setting screens (or cancel settings)(c)[↑] Key(d)[↓] Key(e)[ENT/ZERO] Key(f)

LAC Connector (LAC)

Connecting Laser Autocollimator's cable connector (BNC)(g)

Power supply for LAC (DC-OUT)

Service Power supply for Autocollimator（DC12V/0.5A）(h)

I/O Connector (I/O)

For wiring input-output signals with external instruments(i)Communication Connector(D-sub 9-pin, male)

Cross cable for connecting to the RS232 port of the PC(j)

DC Jack (DC12V-IN)

Connect the dedicated AC Adapter（AC100V〜240V required(k)Power Source for LCD Monitor (DC-OUT) Power source for LCD monitor (12VDC/0.5A)*1(l)

Monitor Output Connector (V-OUT)

For connecting monitor with BNC cable.

(m)

DIP switch

Optional setting (See 1.2.2. Connecting with External Instruments”)

At Setting screen, press this to select items.
Remote Mode should be cancelled when hold down a key for over3 seconds.
At Setting screen, press this to select items.
Key Lock should be cancelled when hold down a key for over 3 seconds.
At Setting Screen press this to fix the setting contents.
ZERO SET should be operated when hold down a key for over 3 seconds at
the Angle Measurement Screen.

※１ When connect VCM-562W to the power supply for LCD monitor (k), do not use adaptor provided
in LCD monitor.

15

SG10-0069-001
System Configuration
H350 Series（HIP Set 1200 / Monitor&HIP Set 1200 / Full Set 1200）
AC100~240V

RS-232C
H350-DC6V
H350-BNC
AC100~240V

Back Panel(a) (b)

(c)

LAC

(d)

(e)

I/O

SW

VIDEO OUT

RS-232C(h)

MONITOR

(g)

DC12V
IN

(f)

HIP-500R*1

H400 / H450 / H600 Series（HIP Set 1200 / Monitor&HIP Set 1200 / Full Set 1200 / High rigidity Set 1200）
RS-232C

HIP-1200C

AC100~240V

Back Panel(a) (b)

LAC

(c)

(d)

(e)

I/O

SW

VIDEO OUT(h)

RS-232C(g)

MONITOR

DC12V
IN

(f)

*1

HIP-500R*1: The power cable for connecting HIP-1200 to the LCD monitor (VCM-562W) power source is provided with
the LCD monitor. The AC adaptor attached to the LCD monitor is left unused.

16

SG10-0069-001

2.3. POWER ON
Switch on the monitor, HIP-1200, and the Laser Auto Collimator in this order.
The soft version number is displayed at the end of right side on main screen(No image each measurement screen and setting screen)
CAUTION: May be loose any data that one has not saved when power off.

17

SG10-0069-001

2.4. Main Screen
The processing unit operations are set after assembling and connections are completed.
HIP‑1200ANGLE
RUN OUT
3BEAM
SYSTEM

Ver1.00

Software Version
NumberMain Screen
Setting Items
Name

Content Description

Perform angle measurement.
Adjust tilt angle of incident collimated light.
Label and measure up to 3 collimating points.
ANGLE
Calculate tilt angle of specified light spot and make OK/NG decision. (Setting items: decisionbasis, centroid calculation method, measurement type, order of labels, tolerance range,
averaging, zoom)
Perform runout measurement.
Measure surface runout.
Calculate centroid of surface runout.
RUN OUT
Calculate tilt angle of centroid and make OK/NG decision. (Setting items: Decision basis,frequency of sampling, binarization threshold, width calculation method, tolerance range ofslant, tolerance range of run-out width)

Page

4

6

3BEAM

Perform 3 BEAM measurement.
Adjust tilt angles of sub-beams for tracking.
Measure θrotation angles of sub-beams.
Measure tilt angle of main beam and make OK/NG decision. (Setting items: Decision basis,noise level, tolerance range of tilt, θreference angle, tolerance range of θangle, bar
display range, averaging)

8

SYSTEM

Common settings for all measurements. (Setting items: Image rotation, image mirroring,
display of measured values, units of display, baud rate, data output method, binarizationthreshold for calibration, calibration, save)3

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SG10-0069-001

3. System Setting
3.1. New Setting (System Setting)
System setting is required before using the processing unit for the first time or whenever resetting of
measurement conditions is necessary.
Follow setting steps shown below and see the applicable sections (numbers written to the left) for details.
Power On

Turn power on *1

MAINShow Main menu

SYSTEM

Select System Menu

ROTATION

Image Rotation Setting

MIRRORING

Image Mirroring Setting

3.5

3.6

3.7

3.8

3.9

3.10

3.3

3.4

3.13

DISPLAY

Measurements Display Setting

UNIT

Set the unit of display

COM

Baud rate settings

DATA OUT

Data Output Setting

BINARY

Binary Threshold Setting for Calibration

CALIBRATE

Calibration Processing
See details 10.3

SAVE

Save Settings

MENU

To The Main Screen with the Menu Key

19

SG10-0069-001(Note)･Default settings assuming the use of the Laser Auto Collimator are stored in FILE1 before shipment from thefactory. Load FILE1 when you wish to return to default settings.
･Do not overwrite FILE1. Otherwise, all default settings will be lost.
･At power on, the processing unit starts using the file number saved or loaded last and the mode of operation
chosen last before power off.
･Whenever settings are altered, save the new data for future use.
*1 “Load ERROR!!” will appear when the saved data contain an error at power on.
When this occurs, select OK in the memory initialization confirmation screen and start again.
Angle calibration is required after memory initialization. See “10. ANGLE CALIBRATION”
for details about angle calibration.

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SG10-0069-001

3.2. Setting Screen & Contents
SYSTEM
BINARY128

CALIBRATE

0.000481 deg / pixel

ROTATION

R90

MIRRORING

X‑Y OFFDISPLAYON

UNIT

min+sec

COM

19200

DATA OUT

I/O

KEY LOCKOFF
OFF

REMOTEOFF

SAVE

Setting Screen
Setting Items
Name

Content Description

BINARYSet the binary threshold at the calibration.

CALIBRATE

Set the calibration

ROTATION

Set the image rotation(Use at the X and Y axis switching.)

Setting Value

Page

30~254

3.3

−

3.4

Left 90°Rotation
Roght 90°Rotation
No Rotation

3.5

Mirroring only Xdirection
Mirroring only Ydirection
Mirroring X,Ydirection
No mirroring

3.6

ON / OFF

3.7

min+sec / deg / mrad

3.8

MIRRORING

Set the image mirroring .

DISPLAY

Set the display existence of measurements.

UN I T

Set the unit.

COM

For selecting communication speed with PC.

9600 / 19200
38400 / 57600

3.9

DATA OUT

Set the measurement result output.

I/O / STREAM

3.10.

KEY LOCK

Set the key lock.
Set the remote control mode.
Saving the setting data

−

3.11

−
1~5

3.12

REMOTE
SAVE

21

3.13

SG10-0069-001

3.3. BINARY
The binary threshold of the calibration is set.
Maximum
Minimum
Input ValueBINARY
MAX=253
MIN=030100

Saturated Pixels

Max. LuminanceLuminance Level Bar
MAX:254

S:14

ENT to Set

Setting Screen

1) Maximum ：Input maximum value2) Minimum ：Input minimum value
3) Input Value：
Key：Threshold increase
Key：Threshold decrease
ENT Key ：OK
MENU Key：Cancel
4) Saturated Pixels ：Luminance is pixels of 254 or more
5) Max. Luminance ：Video Max. luminance6) Luminance Level Bar：See "4.1. Luminance Level Bar"

22

SG10-0069-001

3.4. CALIBRATE
Calibration operation.
See Section 10 for details about calibration.
This setting can only be achieved while in reflection measurement mode (not in external incidence
measurement mode).

3.5. ROTATION
Setting image rotation.
This function is used to match the jig direction and the i¥direction of spot movement in the monitor screen.
Only the image is rotated. The coordinate signs remain unchanged.
OFF
L90
R90

ROTATION

1) OFF：No image rotation
2) L90：The image rotates 90 degrees to the left.
3) R90：The image rotates 90 degrees to the 1right.

Example of processing:Rotate the obtained image 90 degrees to the left or right.
1) No image rotation
ANGLE-SOK
1

min+sec
X1= 15'50"
Y1= 26'55"
d1= 31'20"
MENU to End

2) L90 (90-degree rotation to the left)

3) R90 (90-degree rotation to the right)

ANGLE-S

ANGLE-S

NG

NG
1

1

min+sec
X1= -26'55"
Y1= 15'50"
d1= 31'20"
MENU to End

min+sec
X1= 26'55"
Y1= -15'50"
d1= 31'20"
MENU to End

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SG10-0069-001

3.6. MIRRORING
Image mirroring setup of X and the direction of Y is performed.
While the system is in the image mirroring mode, the image is not displayed in the measurement screen.
Instead, a reticle is displayed where the light spot is. When the object is moved and the spot moves in awrong direction, the image is reverted to align the movement.
MIRRORING X ON
Y ON
X‑Y ONX‑Y OFF

1) X ON
2) Y ON3) X-Y ON
4) X-Y OFF：Image reverted in X direction：Image reverted in Y direction：Image reverted in X and Y directions：Image not reverted (intact)

Example of processing

Mirror tilted to the left
(Monitor)

Mirror tilted to the foreground(Monitor)

Normal setting

Direction of spot movement

Direction of spot movement

Changing settingsLrotationY

L rotation

Match the directions of operation and the spot movement in the screen => Greater ease of observation

24

Combination of:
Image rotation (L)ROTATION Ｌ＋
Mirroring (X axis
only)
MIRRORING Ｘ

SG10-0069-001

3.7. DISPLAY
Setting display or non-display measurement value.
DISPLAY

1) ON
2) OFFON
OFF：Measurement result is displayed on the screen.
：Measurement result is not displayed on the screen.

3.8. UNIT
Selecting a display unit.
Measurement result is sent and displayed in the specified unit.
UNIT1) deg2) min+sec
3) mraddeg
min+sec
mrad：Unit is changed to degree.
：Unit is changed to minute and second.
：Unit is changed to milliradian.

3.9. COM
Setting communication speed.
COM1) 9600
2) 19200
3) 38400
4) 57600

9600
19200
38400
57600

：Baud rate is set to 9600 bps.
：Baud rate is set to 19200 bps.
：Baud rate is set to 38400 bps.
：Baud rate is set to 57600 bps.

25

SG10-0069-001

3.10. DATA OUT
Setting output condition.
DATA OUT

1) STREAM
2) I/OSTREAM
I/O: Ouput data per measurement in 1 to 1 style (max 200msec interval).
: Output data per measurement when I/O HOLD is set to ON.

3.11. KEY LOCK
Invalid key input.
KEY LOCK

1
2
3
4
5

ANGLE
RUN OUT
3BEAM

1)1~5
: Select the file number for saving the current settings and loading at power on.
2) Mode selection: Select the measurement function to which the key lock applies. Measurement conditions
must be set in advance.
Caution: At the factory default, save the calibratio value matched to an autocollimator in the file 1.
Please note when overwrite on file 1, lost the factory default.

* To cancel the key lock mode, hold［↓］key down for 3 seconds or longer.
When the key lock mode is selected, the title at the upper left of the measurement screen will be shown in black
against light blue background color.

26

SG10-0069-001

3.12. REMOTE
Setting remote mode.
The remote mode allows external control via serial communication (control by I/O input will be disabled).
See 12.1 for the list of serial communication commands.
REMOTE

1
2
3
4
5

ANGLE
RUN OUT
3BEAM
OFF

1)1~5
: Select the file number for saving the current settings and loading at power on.
2) Mode selection: Select the measurement function to use while in remote control mode. Measurement
conditions must be set in advance.
When OFF is selected, current settings are saved with the remote mode canceled.

* To cancel the remote mode, hold［↑］key down for 3 seconds or longer or use the remote cancel command.
When the remote mode is selected, the title at the upper left of the measurement screen will start with “*” andbe shown in light blue color.

3.13. SAVE
Saving system setting data
SAVE

1)1~5

1
2
3
4
5

: Select the file number for saving the current system settings.

(Note)･Default settings assuming the use of the Laser Auto Collimator are stored in FILE1 before shipment fromthe factory.
･Do not overwrite FILE1. Otherwise, all default settings will be lost.

27

SG10-0069-001

4. Angle Measurement
4.1. SINGLE Measurement Basic Functions
Light spots are measured, one at a time, and the results are displayed along with an OK/NG decision.
Center of area: When several spots exist (up to 3), specify the spot number for measurement.
Luminance centroid: When several spots exist, the center of several spots is used as the detection point.
* When several spots exist, specify the label number of a single spot for measurement.
Max luminance value
Title
Luminance level (*2)

ANGLE‑S
Acceptance/Rejection judgment“ER” appears when OK/NG
decision cannot be made.

Checks the upper limit of noise at the luminance centroid or displays
the max. luminance value when the luminance peak is reached.

Measurement function is displayed.

Zero point (*1)

Zero point of angle measurement
and acceptance range

233

OK

Acceptance range

R90 AVG

OK” appears when the value falls
within the acceptance range.

Image rotation
Image rotation is displayed.

AveragingLabel number

1

Averaging is displayed.

Unit
Unit is displayed

Measurement Value
Angle from the zero to detected
light centroid(*3)

Spot

min+sec
X1= +2'06"
Y1= ‑0'51"
D1= 2'31"
MENU to End*1 Center of acceptance range (Zero point)
Zero point of angle
See “5.3. ZERO SET” for details.
*2 Luminance Level
Luminance of the detected light is indicated by the level bars. (See "4.1. Luminance Level Bar")
The displayed items vary by the measurement function (center of area, center of brightness, brightnesspeak).
*3 Measurement Value
Measured values at the specified spot are displayed.
The numbers after X, Y, and D represent label numbers.
X, Y, and D each represents the angle from the center of tolerance(as shown below).

Measurement point zero

D

X
28

Y

SG10-0069-001･Luminance Level Bar
No.
Bar Display

Color

Status

1

Black

Under
(Error)2

Yellow

Low

Measurable but unstable due to low brightness.

3

Green

4

Green

Good

Adequate brightness for measurement.
(three green bars represent the best condition for measurement).

5

Green

6

Y/G

7

Red

Content
Unmeasurable as the minimum brightness level is not reached:･BIN (Center of area): Threshold･GRAY(Center of brightness): NOISE level･PEAK（Brightness peak）：Brightness of less than 30
See “5.5. MODE” for details about these levels.

Measurable but brightness is saturating.
High Center of brightness / Brightness peak : Yellow;
Center of area : Green
Unmeasurable due to saturated pixels (pixels with level 254)
Center of area : 32768 pixels or more
Over (Error)
Luminance centroid / Luminance peak : 3 pixel or more

29

SG10-0069-001

4.2. MULTI (Relative) Measurement Basic Functions [MULTI R.]
Several spots (up to 3) are detected, and the results are displayed along with an OK/NG decision.
When several spots exist (up to 3), select spots to be evaluated (1 or all).
The measured values for a given spot are displayed along with relative angles between two spots.
Max luminance value
Title

Checks the upper limit of noise at the luminance centroid or displays themax. luminance value when the luminance peak is reached.

Measurement function is displayed.

Luminance level (*2)
Acceptance of judgment“NG” or “ER” appears when OK/NG
decision cannot be made.

L1‑2=
L2‑3=
L3‑1=

ANGLE‑MR
240

OK

6'21"
2'06"
7'31"

Measurement Value2
Relative angles between two
spots are displayed.

R90
3
1

Measurement point zero (*1)

Zero point of angle measurement
and within acceptance range

Measurement Value
Angle from zero point to the centerof detected light (*3)

2

min+sec
X1= +2'06"
Y1= ‑0'51"
D1= 2'31"
MENU to End

Label number
Spot
Acceptance range
OK” appears when the value falls
within the acceptance range.

*1 Center of acceptance range
Zero point of angle
See “5.3. ZERO SET” for details.
*2 Luminance Level
Brightness of the detected light is indicated by the level bars. (See "4.1. Brightness Level Bar" fordetails.)
The displayed items vary by the measurement function (center of area, center ofbrightness).
*3 Measurement Value
The measured values for a given spot are displayed.
The numbers after X, Y, and D represent label numbers.
Displays angle that from zero spot on the lower left of the screen.
Relative angles between two spots are displayed in the upper right of the screen.
L1-2 : Relative angle between Labels 1-2
L2-3 : Relative angle between Labels 2-3
L3-1 : Relative angle between Labels 3-1
Example of measurement : MULTI (Relative) Measurement (MULTI R.)

Angles between two spots are measured.

30

SG10-0069-001

4.3. MULTI (Absolute) Measurement Basic Functions [MULTI A.]
Several spots (up to 3) are detected, and the results are displayed along with an OK/NG decision.
When several spots exist (up to 3), select spots to be evaluated (1 or all).
The measured values for all spots from zero point are displayed along with an OK/NG decision.
Titl

Max luminance value

Measurement function is displayed.

Luminance level (*2)
Judgment result“ER” appears when OK/NG
decision cannot be made.

Checks the upper limit of noise at the luminance centroid or
displays the max. luminance value when the luminance peak

ANGLE‑MA
240

NG

Tolerance
OK” appears when the value falls
within the tolerance.

R90
3

Zero point of angle measurement
and judgment range

Measurement Value
Angle from the center of tolerance
to the center of detected light (*3)

Label number
Spot

1

Measurement point zero (*1)
2

min+sec
X1= +2'06"
Y1= ‑0'51"
D1= 2'31"
MENU to End

X2= ‑2'26"
Y2= ‑1'45"
D2= 3'21"

X3= ‑3'25"
Y3= 0'33"
D3= 3'31"*1 Zero point
Zero point of angle
See “5.3. ZERO SET” for details.
*2 Luminance Level
Luminance of the detected light is indicated by the level bars. (See "4.1. Luminance Level Bar" fordetails.)
The displayed items vary by the measurement function (center of area, luminance centroid).
*3 Measurement Value
Measured values for all spots are displayed.
The numbers after X, Y, and D represent label numbers.
Example of measurement : MULTI (Absolute) Measurement (MULTI A.)

Angles from the reference point are
displayed for all spots.

31

SG10-0069-001

4.4. OFFSET TILT Measurement Basic Functions
This function is useful when measuring the initial angle followed by relative angle in reference to the initial
position. Three types of decision are available. Judgment Offset function may be added to gain extra freedomof adjustment or inspection.
Titl

Max luminance value

Measurement function is displayed.

Checks the upper limit of noise at theluminance centroid or displays the max.

Luminance level (*2)
ANGLE‑T

Acceptance/rejection judgment“ER” appears when OK/NG
decision cannot be made.

240

Measurement point zero (*1)

NG

Zero point of angle measurement

R90 AVG

Acceptance range“OK” appears when the value
falls within the acceptance range.
1

Judgment Offset

Spot

※３

Offsets the center of acceptance(the arrow is not displayed).

Measurement Value
Angle from the center of acceptance range
to the centroid of detected light (*4)

Label number

min+sec
X1= +2'06"
Y1= ‑0'51"
D1= 2'31"
MENU to End*1 Measurement point zero
Zero point of angle
See “5.3. ZERO” for details.
*2 Luminance Level
Luminance of the detected light is indicated by the level bars. (See "4.1. Brightness Level Bar")
The displayed items vary by the measurement function (center of area, luminance centroid,
luminance peak).
*3 Center of acceptance range
Zero point of angle acceptanceSee “5.3. ZERO SET” for details.
*4 Judgment Offset
When I/O IN_A is set to ON while in the OFFSET TILT mode, the decision type is switched to
Judgment Offset.
See “5.8 TOLERANCE” for details.
*5 Measurement Value
Measured values for spots are displayed.
The numbers after X, Y, and D represent label numbers.

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SG10-0069-001

5. Angle Measurement Setting
5.1. Angle Measurement Usage
5.1.1. New measurement (Angle Measurement Setting)Angle measurement setting is required before using the processing unit for the first time or whenever resettingof measurement conditions is necessary. Follow setting steps shown below and see the applicable sections(numbers written to the left) for details.

5.5

5.6

5.7

5.8

5.9

5.10

5.12

MAIN

Displayed the main menu

ANGLE

Select Angle Measurement Menu

MODE

Centroid calculation method and
Set binary threshold or noise level

LABEL SEL.

Set the measurement function.

NUMBERING

Set the arrangement of the label number

TOLERANCE

Set the tolerance

AVERAGE

Set the average processing

ZOOM

Set the zoom

SAVE

Save settings

5.3
ZERO SETSTART

Set the measurement center position.

Start Angle measurement(Note)
・Default settings assuming the use of the Laser Autocollimator are stored in FILE1 before shipment from thefactory. Load FILE1 when you wish to return to default settings.
・Do not overwrite FILE1. Otherwise, all default settings will be lost.
・At power on, the system will start with the last saved or loaded file number and mode of operation.

33

SG10-0069-001

5.1.2 Measurement Using Saved Setting Data
This section applies to the measurement conditions that are set already.
Follow steps shown below to perform measurement using existing data.
At power on, the system will start with the last saved or loaded file number.
See the applicable sections (numbers written to the left) for details.
Power On

Y

Turn power on *1

Use data from last operation?
N
5.11

5.3

LOAD

ZERO SETSTART

Load settings

Set center of acceptance range

Starts measurement(Note)･Default settings assuming the use of the Laser Auto Collimator are stored in FILE1 before shipment fromthe factory. Load FILE1 when you wish to return to default settings.
･Do not overwrite FILE1. Otherwise, all default settings will be lost.
*1 “Load ERROR!!” will appear when the saved data contain an error at power on.
When this occurs, select OK in the memory initialization confirmation screen and start again.
Angle calibration is required after memory initialization. See “10. ANGLE CALIBRATION”
for details about angle calibration.

34

SG10-0069-001

5.2. Setting Screen & Contents
ANGLE
START
ZERO SETZERO RESET
MODE

BIN

LABEL SEL. SINGLE
NUMBERINGSIZE

TOLERANCEAVERAGE

OFF

ZOOM

x4OFF

LOAD

2

SAVE

Setting Screen
Setting Items
Name
START

Content Description
Setting Value
Start to measure the angle.
−
Set the measurement Point Zero (Angle 0 deg).
ZERO SET−
Measurement value on Measurement screen will be set to zero.
ZERO RESET Set the zero point to the center of measurement area.
−
MODE
Set the method of the detection position calculation.
BIN / GRAY / BMAXSINGLEMULTI R.
LABEL SEL.
Set the measurement function.
MULTI AOFFSETTILTNUMBERING Set the arrangement of the label number.
SIZE / ANGLE
D1 / X-Y / D2
TOLERANCE Set the acceptance range.
OFFSET / OFF
AVERAGE
Set the average processing.
2 / 4 / 8 / OFFZOOM
Set the zoom.
OFF / x4 / x8 / x16
LOAD
Reading out setting data
1~5
SAVE
Saving setting data
1~5

35

Page
4
5.3
5.4
5.5
5.6
5.7
5.8
5.9
5.10
5.11
5.12

SG10-0069-001

5.3. ZERO SETWhen setting up the measurement system, use the two-axis tilt stage (HB10) to move the light spot from thelaser light source mechanically as close to the intersection of the reticle in the screen (preliminary alighment).
Then, select “ZERO SET” in the setting screen. May cause change the centroid position at the center of areaand luminance centroid of centroid estimation. (After change setting, please do again ZERO SET)
5.3.1 Setting the zero point
The center is to be a standard point of acceptance range(indicated by pink lines) at the zero point. The zero
point and acceptance range can be shifted as needed within the range of measurement.
1) After angle calibration is completed, select [ZERO SET] and press [ENT] key.
2) Using a master substrate, etc, display a detected light that is to be a zero spot.
3) Press [ENT] key.
The center of the detected light is now defined as the zero point.
[ZERO SET] appears in the upper left corner of the screen.
The angle from the zero point is displayed in the lower left corner of the screen.
ZERO SETZERO SET

X = +2'15"

X =

0'00"

Y = ‑8'10"

Y =

0'00"

ZERO SET

5.3.2 Definition of centers
A. Optical center
The optical center is the unique center of an optical system of the Laser Auto Collimator. It is adjusted tothe center of the CCD built into the Laser Auto Collimator head.
The intersection of the green lines (displayed as the default point when setting the centers per 10.3.3) isthe optical center.
B. Center of measurement range
The center of measurement range is the zero-point referenced in angle calibration.
The range is set per 10.3.2 after selecting Auto Collimator per 10.3.1. Normally, the center ofmeasurement range should be alighned with the optical center (A) above.
C. Zero point
Should be zero point of measurement value. (Must be same spot zero point and center of acceptancewhen the single multi mode. Display blue cross-point
B.Must be same spot center of measurement range and zero point at the setting center ofmeasurement range.
B.Can be shifted zero point with ZERO SET after setting center of measurement range.
D.Center of tolerance
Can be offset the center of tolerance (cente of pinc circle) from zero point at the only
OFFSETTILT mode.

36

SG10-0069-001

5.4. ZERO RESET
Set zero point to center of measurement range.
ZERO RESET OKCANCEL

1) OK
2) CANCEL：Zero point is changed at the same position of center of measurement range.
：Zero point is not change .

ZERO RESET

5.5. MODE
Set the method of the detection of the point.
MODE

BIN
GRAY
PEAK

1) Center of area (BIN)
The angle is determined by calculating the center of area based on the valid pixels having brightness higher than
the threshold.
2) Luminance centroid(GRAY)
The angle is determined by calculating the weighted luminance centroid based on the valid pixels having luminancehigher than the defined noise level.
3) Luminance peak (PEAK)
The maximum luminance is calculated and the angle is determined according to the position of the maximum
brightness.

(Note)
Luminance peak applies to single spot measurement only.

37

SG10-0069-001

The position (angle) of the detected light can be calculated in three ways, the center of area (BIN) and luminancecentroid (GRAY) and the luminance peak(PEAK).
(* Objects characterized by scattering light cannot be measured.)Recommended mode by the purpose
Center of area (BIN)→ Mirrors, beam splitters, etc(Objects of measurement characterized by direct reflection)
Luminance Centroid (GRAY) → Objective lenses, etc(Objects of measurement characterized by strained reflection)
Luminance peak (PEAK)→ Objective lenses, edge surface etc(Objects of measurement characterized by strained reflection)■Center of area measurement■Luminance centroid measurement■Luminance peak measurement
Single spot only

Center of area in

Luminance centroid in

area

area

(Unit of pixel)

thresholdthresholdthresholdCentoroid position¾Mirror¾GlassLuminance peakCentoroid position¾Lens (With plane part)

The above shows results of a single spot measurement.

38

Luminance peak position

SG10-0069-001
5.5.1 Center of area(BIN)
1) Select “MODE” on the Setting screen and press [ENT] Key.
2) Select “BIN” and press [ENT] Key.
The image to be processed is displayed in white.
ANGLE
START
ZERO SETZERO RESET
MODE
BIN
LABEL SEL. GRAYNUMBERING BMAXTOLERANCEAVERAGE
ZOOM
LOAD
SAVE

3) Adjust levels of binary threshold with [↑][↓] Key. When the adjustment is done, press [ENT] Key.
If you wish to cancel it, press [MENU/RUN] Key.
Press [↑][↓] Keys to change the value.

Luminance Level Max. Luminance Saturated Pixels

BIN
MAX=254
MIN=030132

BIN
MAX=254
MIN=030
252

MAX:254

MAX:254

S:12

Before

S:12

After change･Important notes about setting
When more than one detected light is in view for threshold setting, the light dots must be adjusted as shown
below so that there is only one dot.
1: Lower the LD volume of the Laser Auto Collimator.
2: Focus the beam diameter of the Laser Auto Collimator with the pinhole plate so that light lands on thedesired measurement point.
3: Increase the shutter speed of the Laser Auto Collimator.
4: Increase the binary threshold.
･About binarization
Binarization refers to setting the threshold using a gradation level between 30 and 254. Pixels over thethreshold are considered valid. An error is returned when the number of valid pixels exceeds 32767.
･Luminance Level
Luminance of the detected light is indicated by the level bars. (See "4.1. Luminance Level Bar")
The displayed items vary by the measurement function (center of area, Luminance centroid, LuminancePeak).
39

SG10-0069-001
5.5.2 Luminance centroid(GRAY)
1) Select ”MODE” on the Setting screen, and press [ENT] Key.
2) Select ”GRAY”, and press [ENT] Key.
3) Select ”NOIZE” , ”NCHECK HIGH” or “NCHECK LOW”, “NCHECK OFF”, and press [ENT] Key.
The image to be processed is displayed in white.
ANGLE
START
ZERO SETZERO RESET
MODE
BIN
LABEL SEL. GRAYNUMBERING PEAKTOLERANCEAVERAGE
ZOOM
LOAD
SAVE

NOIZE
NCHECK HIGHNCHECK LOW
NCHECK OFF

GRAY selection screenａ）NOIZEｂ）NCHECK HIGHｃ）NCHECK LOWｄ）NCHECK OFF：Set the noise level (minimum level)：Set the upper limit of noise (NG if measured value exceeds this level
and is 254 or less).
: Set the lower limit of noise (NG if measured value falls below thislevel and is equal to the noise level or higher).
：Luminance level check is not performed.

Luminance level check
Noise level：N，Lower limit：L，Upper limit：HER

Luminance

30

NG

N

OK

L

※The following relation applies to N, L, and H when luminance level checkis performed:
Luminance 30≦ N < L < H ≦254
If N is greater than L, N is changed to a value smaller than 1.
The following applies to N when luminance level check is not performed:
Luminance 30≦ N ≦254

40

NG

H

ER

254

SG10-0069-001

4) Adjust noise level with [↑][↓] Key. When the adjustment is done, press [ENT] Key.
Press [MENU] Key if cancellation.
Press [↑][↓] Keys to change the value.
GRAY
MAX=254
MIN=030132

Max. LuminanceLuminance Level Bar（See,"4.1”）
MAX:254

S:12

Saturated Pixels

NOISE Level Setting･Important notes about setting
Adjust the laser output (volume) and shutter speed of the Laser Auto Collimator so that only the measurable
detected light is measured.
An error is returned (unmeasurable) when the number of saturated pixels (luminance level 254) is 2 or more
but the measured value is displayed. (For best results, work with settings that lead to green bars.)･About a noise level
A noise level refers to the threshold defined with a gradation level between 30 and 254. Pixels under thedefined noise level are excluded from measurement or calculation.
･Luminance Level
Indicates luminance of detected light with level bar. (See "4.1. Luminance Level Bar")
Display level varies for each measurement function (center of area, luminance centroid, luminance peak).

41

SG10-0069-001

5.5.3 Luminance Peak(PEAK)
1) Select ”MODE”, and press [ENT] Key.
2) Select ”PEAK”, and press [ENT] Key.
ANGLE
START
ZERO SETZERO RESET
MODE
BIN
LABEL SEL. GRAYNUMBERING PEAKTOLERANCEAVERAGE
ZOOM
LOAD
SAVE

PEAK selection screen
Detect the position the maximum luminance.
The center of area is detected when the maximum luminance extends over several pixels continuously. (*1)
An error is returned if the maximum luminance extends over several pixels discontinuously. (*2)
(Note)
This applies to single-spot measurements only.
An error will result in multi-spot measurements.
*1 Max. luminance extends continuously*2 Max. luminance extends discontinuously (Error)

Level 255
Luminance
Peak

Level 255

Luminance
Peak

Center of area processing

Level 0Level 0Calculation position

Calculation position

42

SG10-0069-001

5.6. LABEL SEL.
Set the measurement function.
LABEL SEL. SINGLE
OFFSETTI
MULTI R.
MULTI A.

1) SINGLE：Perform single-spot measurement.
Measure the angle of a spot (single spot) from the center of measurement.
2) OFFSETTILT：Perform offset tilt measurement by single-spot measurement.
Measure the angle of a spot (single spot) from the center of measurement.
Change an acceptance range or an offset range by I/O input.
3) MULTI R. ：Perform multi-spot (relative) measurement.
Measure the relative angles between all spots (up to 3 spots).
4) MULTI A. ：Perform multi-spot (absolute) measurement.
Measure the angles of all spots (up to 3 spots) from the center of measurement.
5.6.1 Single Spot Measurement (SINGLE)
Single-spot measurement function is used when a single spot needs to be measured.
When several spots exist, specify the label number of a single spot for measurement.
1) Select ” LABEL SEL.” , and press [ENT] Key.
2) Select ” SINGLE”, and press [ENT] Key.
3) Select a label number from “1~3” , and press [ENT] key.
When cancelation, press [MENU] Key.
LABEL SEL. SINGLE
OFFSETTILTMULTI R.
MULTI A.

1
2
3a) 1：The spot having label number 1 is chosen for measurement.
b) 2：The spot having label number 2 is chosen for measurement.
c) 3：The spot having label number 3 is chosen for measurement.
* An error is returned when the selected label number of the spot is not reached.

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SG10-0069-001

5.6.2 OFFSETTILT Measurement (OFFSETTILT)
It starts to perform absolutely measures from zero point, then perform static relative measurement as absolutely
measurement point is to be zero point.
1) Select " LABEL SEL." , and press [ENT] Key.
2) Select " OFFSETTILT", and press [ENT] Key.
3) Select “D1/D1” “D1/D2” or “D1/X-Y” from the Setting screen, and press [ENT] key.
When cancelation, press [MENU] Key.
LABEL SEL. SINGLE
OFFSETTILTMULTI R.
MULTI A.

D1/D1
D1/D2
D1/X‑Ya) D1/D1 ：The circle (D1) is used for absolute measurement and relative measurement .
b) D1/D2 ：Using circle (D1) acceptance range for absolute measurement, and circle (D2) acceptance
range is for relative measurement.
c) D1/X-Y：Acceptance range of circle (D1) is for absolute measurement, and square (X-Y) is for relative
measurement.
Example of use : Inspection of optical pickup actuators
Enlarged illustration
OK

D1

D2

OffsetTolerance

Measure(absolutely)theneutralposition (tilt). (D1)The

secondjudgement

circle(D2) is offset based on
neutral posture and a relative
tilt is measured.

44

SG10-0069-001

5.6.3 MULTI Relativity Measurement (MULTI R.)
Multi-spot (relative) measurement function is used to perform relative measurement (angles between spots).
A relative measurement determines the angle between two spots.
1) Select "LABEL SEL.", press [ENT] Key.
2) Select "MULTI R.", press [ENT] Key.
3) Select a spot from “1~3, ALL” , and press [ENT] key.
When cancelation, press [MENU] Key.
LABEL SEL. SINGLE
OFFSETTI
MULTI R.
MULTI A.

a) 1
b) 2
c) 3
d) ALL

1
2
3
ALL：The label number 1 is judged.
：The label number 2 is judged.
：The label number 3 is judged.
：All label numbers are judged. NG is returned when one of the spots falls outside of the tolerance
range.
EX1：OK if label number 1 is judged.
EX2：OK if label number 2 is judged.
EX3：NG if label number 3 is judged.
EX4：NG if all spots are judged.

3

1

2

The angle of the specified spot from the center of acceptance range is displayed (or the angle of the spot withlabel number 1 if all spots are chosen for tolerance).
* An error is returned when the selected label number of the spot is not reached. No error is returned when
ALL is selected and at least one of the spots meets the label number.

45

SG10-0069-001

5.6.4 MULTI Absolute Measurement (MULTI A.)
In case of absolutely measurement (angle from center), use MULTI Absolute Measurement function.
The angles from the center of acceptance range are displayed for all spots (up to 3 spots in total) .
1) Select "LABEL SEL." , and press [ENT] Key.
2) Select "MULTI A.", and press [ENT] Key.
3) Select a spot from “1~3, ALL” , and pres [ENT] key.
When cancellation, press [MENU] Key.
LABEL SEL. SINGLE
OFFSETTI
MULTI R.
MULTI A.

a) 1
b) 2
c) 3
d) ALL

1
2
3
ALL：The label number 1 is judged.
：The label number 2 is judged.
：The label number 3 is judged.
：All label numbers are judged. NG is returned when one of the spots falls outside of the tolerance
range.
EX1：OK if label number 1 is judged.
EX2：OK if label number 2 is judged.
EX3：NG if label number 3 is judged.
3
EX4 ：NG if all label numbers are
judged.

1

2* An error is returned when the selected label number of the spot is not reached. No error is returned when
ALL is selected and at least one of the spots meets the label number.

46

SG10-0069-001

5.7. NUMBERINGThe arrangement of the label number is set.
NUMBERING

SIZE
ANGLE

1) SIZE：Spots are numbered starting with the spot having the largest area (in the descending orderof area).
2) ANGLE：Spots are numbered starting with the spot having the largest angle from the center ofmeasurement (in the ascending order of angle).

Ex1) SIZE

Ex2) ANGLE

1

3

2

1

3

5.8. TOLERANCE
Set the tolerance.
TOLERANCE

1) D1
2) X-Y
3) D2
4) OFFSET
5) OFF

D1
X‑Y
D2
OFFSET
OFF：Set the circle for the acceptance range.
Set the radius from the center of measurement.
：Set the square for the acceptance range.
Set X and Y from the center of acceptance.
：Set the circle for the tolerance for Relativity OFFSETTILT measurement.
Set the radius from the center of measurement.
：Set the offset for the tolerance for Relativity OFFSETTILT measurement.
Set the offset angle from the center of measurement.
：Not work.

47

2

SG10-0069-001

When set the circle (D1)Enter the absolute value of the judgment angle with [↑][↓][ENT] Keys. The cursor moves to the next higher
digit each time [ENT] key is pressed. The change is finalized when the highest digit is set.
ANGLE
TOLERANCE

Maximum
Minimum

MAX= 030'00"
MIN= 000'04"
020'00"sec

Input Value

Setting screen
When set the square (X-Y)
Select XL (Left), XH (Right), YH (Upper), YL (Bottom) that means the tolerance of square, and input the
Judgment angle.
XL

XH

ANGLE
TOLERANCE
XH
XL
YH
YL

:+020'00":+002'00":+010'00":‑010'00"

YH

YL
Maximum
Minimum

MAX= 030'00"
MIN= 000'04"
020'00"sec

Input Value48

SG10-0069-001･Offset setting
Select X or Y at a time and enter the angle.

ANGLE
TOLERANCEX
Y

Maximum
Minimum:+020'00":‑030'00"

MAX=+030'00"
MIN=‑030'00"
020'00"sec

Input valueEx) Offset
Offsetting the center of judgment from the center of measurement (intersection of the blue reticle) in thespecified direction (X, Y).
Angle Measurement (OFFSETTILT D1→D1)
Absolute Measurement (D1 Judgment & Display)

Relative Measurement (D1 Judgment & Display)

ANGLE-R

ANGLE-R

OK

OK
1

1

Relative Measurement and Offset
ANGLE-RNG
1（

Offset）
49

SG10-0069-001

5.9. AVERAGE
Set the average processing.
Averaging applies only to the specified label number in single-spot measurement.
AVERAGE

1) 2
2) 4
3) 8
4) OFF

2
4
8
OFF：Average results from 2 measurements.
：Average results from 4 measurements.
：Average results from 8 measurements.
：Averaging is not performed.

Averaging is performed by calculating the moving average from continuous measurements.
* When a measurement error is returned, the count of continuous measurements is reset to 1.
Example：Average of 8 measurements
1

2

3

4

5

6

7

8

9

10 11 12 ・ ・ ・

1

2

3

4

5

6

7

8

2

3

4

5

6

7

8

9

3

4

5

6

7

8

9

10

4

5

6

7

8

9

10 11

5

6

7

8

9

10 11 12

Average Former Data

Average Data Calculation

50

SG10-0069-001

5.10. ZOOMThe zoom function can be turned on or off as shown below.
The zoom display is indicated by a yellow rectangle according to the zoom specification.
ANGLE
START
ZERO SETZERO RESETMODE
LABEL SEL.
NUMBERINGTOLERANCEAVERAGE
ZOOM
LOAD
SAVE

Zoom Area

OFF
x4
x8
x16

Key：Select Change
ENT Key ：OK
MENUKey：Cancel
1) OFF2) x4
3) x8
4) x16：Zoom display is not performed.
：X4 zoom display.
：X8 zoom display.
：X16 zoom display.

When you are moving toward the center of tolerance, the view of the judgment range may be very small for easyinspection of the central area.
When zoom display is specified, the display is zoomed automatically when the spot enters the zoom area.
･“ZOOM” appears in the monitor and the detected light disappears while the enlarged view is displayed (onlythe crossline is visible).
･An judgment range falling outside of the enlarged view area will not be displayed.
･When “AREA” is set to “X-Y” the view will be enlarged about the center of the rectangle.

51

SG10-0069-001

Ex）Circle
Center of tolerance shown with light blue
1) Normal2)ZoomANGLE‑S

ANGLE‑S

OK

NG

ZOOM

1

1

min+sec
X1= +23'06"
Y1= ‑9'11"
D1= 24'51"
MENU to End

min+sec
X1= +2'06"
Y1= ‑0'51"
D1= 2'31"
MENU to End

The zoom area is not shown in the screen.

Ex）X-Y
Center of tolerance shown with light blue
2) Zoom

1) Normal
ANGLE‑S

ANGLE‑S

OK

NG

ZOOM

1

1

min+sec
X1= +23'06"
Y1= ‑9'11"
D1= 24'51"
MENU to End

min+sec
X1= +2'06"
Y1= ‑0'51"
D1= 2'31"
MENU to End

The zoom area is not shown in the screen.
* The area for X16 zoom display is about 0.06 times the measurement range.
(Ex) 0.5-deg range Laser Auto Collimator
0.5 x 0.06 = 0.03 deg
The view will be enlarged about the center of tolerance when the value falls between ±0.03 deg.

52

SG10-0069-001

5.11. LOAD
Reading out setting data
LOAD1) 1~512
3
4
5：Load data from the selected number.
An error is returned when no data have been saved under the selected number.

(Note)･Default settings assuming the use of the Laser Auto Collimator are stored in FILE1 before shipmentfrom the factory.
･Load FILE1 when you wish to return to default settings.
* Each file contains angle calibration data in addition to the conditions of measurement.
Measurement conditions can be saved for up to five auto collimators having different ranges ofmeasurement.

5.12. SAVE
Saving setting dataSAVE1) 1~512
3
4
5：Angle measurement conditions and system data are saved under the selected number.

(Note)･Default settings assuming the use of the Laser Auto Collimator are stored in FILE1 before shipmentfrom the factory.
* Each file contains angle calibration data in addition to the conditions of measurement.
Measurement conditions can be saved for up to five auto collimators having different ranges ofmeasurement.

53

SG10-0069-001

6. Runout Measurement
6.1. Runout Measurement Basic Functions
The runout measurement function may be used to measure the surface runout and axial tilt of optical disks,
precision motors, etc.
Title
State Display
Measurement function is displayed.

Sampling frequency
Current/total number ofmeasurements

Acceptance/rejection judgment“ER” appears when OK/NG
decision cannot be made.

RUN OUT
50/ 50Appears at the end of sampling

Measurement point zero (*1)

STOP

Angle measurement and tolerance
should be zero point.

NG
R90

Tolerance of runout/til.
Judgment should be OK/NG
within a tolerance range.

Image rotation
Image rotation is displayed.

Center of runout
Tolerance of runout width
Juegment should be OK withina tolerance range.

Unit
Unit is displayed

Tilt measurement
Display the angle between
zero point and spot centroid.

min+sec
X1= +0'26"
Y1= ‑1'11"
D1= 1'21"
MENU to End

Ww= 0'51"
Wl= 1'15"*1 Zero Point
Zero point of the angle
See “7.3. ZERO SET” for details.

54

Runout width measurement
Width along XY or major/minor axes

SG10-0069-001

7. Runout Measurement Setting
7.1. Runout Measurement Usage
7.1.1 New measurement (Runout MeasurementSetting)
Runout measurement setting is required before using the processing unit for the first time or whenever resettingof measurement conditions is necessary.
Follow setting steps shown below and see the applicable sections (numbers written to the left) for details.
MAIN

7.5

7.6

7.7

7.8

7.9

7.11

Displayed the main menu

RUN OUT

Select the runout measurement

SAMPLESet the sampling frequency

BINARYSet the binary threshold

CALC MODE

Set the method of calculating width of runout

TOLERANCE

Set the acceptance range

WIDTH

Set the judgment size of the width of runout.

SAVE

Save settings

7.3
ZERO SETSTART

Set the measurement center position.

Start runout measurement(Note)
・Default settings assuming the use of the Laser Auto Collimator are stored in FILE1 before shipment from thefactory. Load FILE1 when you wish to return to default settings.
・Do not overwrite FILE1. Otherwise, all default settings will be lost.
・At power on, the system will start with the last saved or loaded file.
・At power on, the system will start with the last saved or loaded file number and mode of operation.

55

SG10-0069-001

7.1.2 Measurement Using Saved Setting Data
This section applies to the measurement conditions that are set already.
Follow steps shown below to perform measurement using existing data.
At power on, the system will start with the last saved or loaded file.
See the applicable sections (numbers written to the left) for details.
Power On

Y

Turn power on *1

Use data from last operation?
N
7.10

7.3

LOAD

ZERO SETSTART

Load settings

Set center of evaluation

Start measurement(Note)･Default settings assuming the use of the Laser Auto Collimator are stored in FILE1 before shipment fromthe factory. Load FILE1 when you wish to return to default settings.
･Do not overwrite FILE1. Otherwise, all default settings will be lost.
*1 “Load ERROR!!” will appear when the saved data contain an error at power on.
When this occurs, select OK in the memory initialization confirmation screen and start again.
Angle calibration is required after memory initialization. See “10. ANGLE CALIBRATION”
for details about angle calibration.

56

SG10-0069-001

7.2. Setting Screen & Contents
RUN OUTSTARTZERO SETZERO RESETSAMPLE

50

BINARY140

CALC MODEFILL

TOLERANCE
WIDTH
LOAD

2 OFF

SAVE

設定画面
Setting Items
Name
START
ZERO SETZERO RESETSAMPLE
BINARYCALC MODE
TOLERANCE
WIDTH
LOAD
SAVE

Content Description
Start to measure the runout
Set the point zero(Angle 0 deg).
Measurement value on Measurement screen will be set to zero.
Zero point is set to the center of measurement range.
Set the number of sampling.
Set the binary threshold at the centroid caliculated.
Set the tilt width caluculation mode.
Set the judgment area.
Set the tilt width judgment size.
Reading out setting data
Save the setting data

57

Setting Value
−

Page
6

−

7.3

−
1~999
30~254
FILL / FEAT
D / X-Y / OFF
ON / OFF
1~5
1~5

7.4
7.5
7.6
7.7
7.8
7.9
7.10
7.11

SG10-0069-001

7.3. ZERO SETWhen setting up the measurement system, use the two-axis tilt stage (HB10) to move the light spot from thelaser light source mechanically as close to the intersection of the reticle in the screen (preliminary alighment).
Then, select “ZERO SET” in the setting screen.
･7.3.1 Setting the zero point
It is must be a reference point of tolerance (indicated by pink lines) at tne zero point of measurement value.
Can be shifted tolerance and zero point at the range of measurement.
1)After angle calibration is completed, select [ZERO SET] and press [ENT] key.
2)Using a master substrate, etc, display a detected light that is to be defined as the zero point.
3)Press [ENT] key.
4)Centroid position of light spot will be the zero point.
[ZERO SET] appears in the upper left corner of the screen.
The angle from the center of measurement range is displayed in the lower left corner of the screen.

ZERO SET
X = +2'15"
Y = ‑8'10"

58

SG10-0069-001

7.4. ZERO RESET
Set the zero point to the center of measurement range.
ZERO RESET OKCANCEL

1) OK
2) CANCEL：The zero point is changed to the center of measurement range.
：The zero point remains unchanged.

7.5. SAMPLE
Set the number of image frames (sampling) to be overlaid for runout measurement.
SAMPLE

MAX=999
MIN=001050

Spots should connect to each other and their traces, when connected, should form a single closed surface. An
error is returned when there are two or more such closed surfaces. When an error occurs, the sampling
frequency should be changed.
* A greater sampling will increase the processing time.
･ Runout processing

When images are overlaid, spots will

Pixels are enlarged so that the spots

form an orbit.

are connected to each other.

.
画素膨張させた分、画素収
Pixelshrinks to the extent thatthe pixel is expanded, and thereturning center of area andwidth are measured.

When the spots are
光点が繋がったら、光点
connected, fill up within
the area.

59

Caution：The exact center of gravity will
not be determined if the spots are
not connected. When this occurs,
increase the number of samples
so that the spots are connected.
Measurement will not be
performed if they do not form a
losed line.

SG10-0069-001

7.6. BINARY
Set the binary threshold at the tilt measurement.
Maximum
Minimum
Input ValueBINARY
MAX=254
MIN=030140Saturated Pixels

Max. Brightness

Brightness Level Bar
MAX:254

S:14

ENT to Set

Setting Screen

1) Maximum ：Input maximum value2) Minimum ：Input minimum value
3) Input Value：
Key：Threshold increase
Key：Threshold decrease
ENT Key ：OK
MENU Key：Cancel
4) Saturated Pixels：Luminance is pixels of 254 or more
5) Max. Luminance value ：Video Max. Luminance6) Luminance Level Bar ：See "4.1. Luminance Level Bar"60

SG10-0069-001

7.7. CALC MODE
The center of judgment is set to the center of measurement range.
CALC MODE

FILL
FEAT

1) FILL：Calculate the width from the center of the closed line along X and Y directions.
2) FEAT：Determine the tilt of the area inside the closed line and calculate the lengths of the major
and minor axes in reference to the tilt.

Short axis
Long axis

Tilt angle

Axis-Y

Axis-X

FEAT：Calculate long axis (Wl) and short axis (Ww)with moment of inertia.

FILL：This means width of X axis (Wx) and Y axis (Wy)from centroid coodinate.

7.8. TOLERANCEThe judgment range of the runout center position is set.
TOLERANCE

1) D
2) X-Y
3) OFF

D
X‑Y
OFF：Set the circle for the range of judgment.
Set the radius from the center of tolerance.
：Set the square for the range of judgment.
Set X and Y from the center of tolerance.
：No judge.

61

SG10-0069-001

7.8.1

In case of setting circle
Enter the absolute value of the judgment angle using [↑][↓][ENT] Keys. The cursor moves to the next higher
digit each time [ENT] key is pressed. The change is finalized when the highest digit is set.
RUN OUTTOLERANCE

Maximum
Minimum

MAX= 030'00"
MIN= 000'04"
020'00"sec

Input Value

7.8.2

In case of X-Y setting
Select each tolerance of the square and input: XL(Left)，XH(Right)，YH(Upper)，YL(Bottom).
XL

XH

RUN OUTTOLERANCE
XH
XL
YH
YL

:+020'00":+002'00":+010'00":‑010'00"

YH

YL

Maximum
Minimum

MAX= 030'00"
MIN= 000'04"
020'00"sec

Input Value

62

SG10-0069-001

7.9. WIDTH
Set the runout width judgment.
ON
OFF

WIDTH

1) ON
2) OFF
7.9.1：Set runout width judgment to ON and enter the judgment width.
：Runout width judgment is not performed.

Judgment width setting
Setting items differ by the method of runout width calculation.
FILL：Wide_X（X-axis angle）, Wide_Y（Y-axis angle）
FEAT：Width（minor axis angle），Length（major axis anglr）* See Section 7.7 for more information about FILL and FEAT.
RUN OUTTOLERANCE
Width:+015'00"
Length :+006'00"

Runout centroid tolerance

Runout width tolerance

Maximum
Minimum

MAX= 030'00"
MIN= 000'04"
015'00"sec

Input Value

63

SG10-0069-001

7.10. LOAD
Save and Reading data
1
2
3
4
5

LOAD

1) 1~5：Load data from the selected number.
An error is returned when no data have been saved under the selected number.

(Note)･Default settings assuming the use of the Laser Autocollimator are stored in FILE1 before shipmentfrom the factory.
･Load FILE1 when you wish to return to default settings.
* Each file contains angle calibration data in addition to the conditions of measurement.
Measurement conditions can be saved for up to five auto collimators having different ranges ofmeasurement.

7.11. SAVE
Saving setting data
SAVE

1)1~5

1
2
3
4
5

：Angle measurement conditions and system data are saved under the selected number.

(Note)･Default settings assuming the use of the Laser Autocollimator are stored in FILE1 before shipmentfrom the factory.
* Each file contains angle calibration data in addition to the conditions of measurement.
Measurement conditions can be saved for up to five auto collimators having different ranges ofmeasurement.

64SG10-0069-001

8. 3 BEAM Measurement
8.1. Sub-beam tilt angle measurement basic functions
Sub-beam tilt angle measurement is used to measure the sub-beam (±1 sub-beam) resulting from grating ofan optical pickup.

Luminance Level
Display the luminanceAcceptance/Rejection judgment result

Title

Max. Luminance Value

Display the function

Displays max.luminance value ofSub-beam.

3BEAM

NG

179

Condition ※2

Displays OK/NG based on a judgment.
In case of “ER”, cannot be detected

Image Rotation
Display the Image
Rotation.

Lavel Number

R90 AVG

Spot

Averaging
Display the average.

+1

θ±1Measurement Value
The line connecting sub-beamis displayed.

‑1

Unit
Fixed degree.

Basis Angleθ

Me asurement value
Tilt line connecting sub-beams, basic
Tilt angle and their difference are
Displayed. ※1

Basic angle line is displayeddegθDelta= ‑10.253
θ±1 = ‑10.253
θBasis= 0.000
MENU to End±5.00

θ Angle Bar
Differencial angle from basic angle
is displayed in bars.
Displays acceptance range.

*1 Measurement Value
θDelta：Difference angle of Basic tilt angle and The tilt angle connects the sub beam.
θ±１ ：The tilt angle connects the sub beam.
θBasis：Basic tilt angle*2 Luminance Level
No.
Bar display

Color

1

Black

2

Status
Under(Error)Content
Unmeasurable as the minimum luminance level is not reached:
See “9.4. THRESHOLD”

Yellow

Low

Measurable but unstable due to low luminance.

3

Green

Good

4

Green

Good

5

Green

Best

6

YellowHigh

Measurable but luminance is saturating.

7

Red

Over
(Error)Unmeasurable due to saturated pixels (pixels with level 254)
3 pixel or more

Adequate luminance for measurement.
(three green bars represent the best condition for measurement).

65SG10-0069-001

8.2. Main beam measurement basic functions
Main beam measurement is used to measure the main beam resulting from grating of an optical pickup.
I/O IN_A set to ON : Main beam measurement is performed.
IN_A set to OFF : Sub-beam tilt angle measurement is performed.
Title
Display the function.

Luminance Level
Display the luminance condition

Acceptance/Rejectionjudgment result

3BEAM

NG

Displays OK/NG based on a judgment.
In case of “ER”, cannot be detected

Center of Measurement

Tolerance
Result must be OK within
the tolerance.
0Lavel Number
Spot

Unit

Measurement Value
Angle from the center ofmeasurement to the center of spot
centroid.

※１

Zero point of angle measurement andAcceptance range.

min+sec
X0= +2'06"
Y0= ‑0'51"
D0= 2'31"
MENU to End*1 Center of measurement
Center of measurement is zero point randomly set the judgment angle.
See “9.3 ZERO SET” for details.

66SG10-0069-001

9. 3BEAM Measurement Setting
9.1. 3BEAM Measurement Usage
9.1.1 New measurement (3BEAM MeasurementSetting)Angle measurement setting is required before using the processing unit for the first time or whenever resettingof measurement conditions is necessary. Follow setting steps shown below and see the applicable sections(numbers written to the left) for details.

9.5

9.6

9.7

9.8

9.10

MAIN

Displayed the main menu

3BEAM

Select the 3BEAM measurement menu

THRESHOLD

Set the threshold

NOIZE CHK.

Set the luminance judgment point of Sub-Beam

TOLERANCE

Set the judgment area of main beam

θANGLESet the judgment range of Sub-beam tilt

SAVE

Save settings

9.3
ZERO SET

Set the center of measurement

START

Start 3 BEAM measurement(Note)･Default settings assuming the use of the Laser Auto Collimator are stored in FILE1 before shipmentfrom the factory. Load FILE1 when you wish to return to default settings.
･Do not overwrite FILE1. Otherwise, all default settings will be lost.
･Whenever settings are altered, save the new data for future use.
・At power on, the system will start with the last saved or loaded file number and mode of operation.

67

SG10-0069-001

9.1.2 Measurement using the saved setting data
This section applies to the measurement conditions that are set already.
Follow steps shown below to perform measurement using existing data.
At power on, the system will start with the last saved or loaded file number and mode of operation.
See the applicable sections (numbers written to the left) for details.
Power On

Y

Turn power on *1

Use data from last operation?
N
9.8

9.3

LOAD

ZERO SETSTART

Load settings

Set center of measurement

Start measurement(Note)･Default settings assuming the use of the Laser Auto Collimator are stored in FILE1 before shipment fromthe factory. Load FILE1 when you wish to return to default settings.
･Do not overwrite FILE1. Otherwise, all default settings will be lost.
*1 “Load ERROR!!” will appear when the saved data contain an error at power on.
When this occurs, select OK in the memory initialization confirmation screen and start again.
Angle calibration is required after memory initialization. See “10. ANGLE CALIBRATION”
for details about angle calibration.

68SG10-0069-001

9.2. Setting Screen & Contents
3BEAM
START
ZERO SETZERO RESETTHRESHOLD

MAX 35NOIZE CHK.
TOLERANCEθANGLE

0.000,0.500

LOAD

2

SAVE

Setting Screen
Setting Items
Name
START
ZERO SETZERO RESETTHRESHOLDNOIZE CHK.
TOLERANCEθANGLELOAD
SAVEContent Description
Setting Value
Start the 3 BEAM measurement.
−
Set the center of judgment.
−
Center of judgment is set to the center of measurement range.
−
Set the luminance threshold.
30~254 / 1~99
Judge the sub-beam luminance threshold.
−Set the tolerance of main detected light.
CIRCLE / X-Y / OFFBASIS
AVERAGEJUDGE RANGE
The judgment tilt angle of the sub beam is set.
JUDGE OFFBAR RANGEBAR OFF
Reading out setting data
1~5
Save the data
1~5

69

Page
8
9.3
9.4
9.5
9.6
9.7

9.8

9.9
9.10

SG10-0069-001

9.3. ZERO SETWhen setting up the measurement system, use the two-axis tilt stage (HB10) to move the light spot from the laser
light source mechanically as close to the intersection of the reticle in the screen (preliminary alighment). Then,
select “ZERO SET” in the setting screen.
9.3.1 Setting the zero point
This means zero point of measurement value, and basic point of tolerance (indicated by magenta lines)
The center of measurement and the tolerance can be shifted as needed within the range of measurement.
1) After angle calibration is completed, select [ZERO SET] and press [ENT] key.
2) Using a master substrate, etc, display a detected light.
3) Press [ENT] key.
4)The centroid of spot is a zero point.
[ZERO SET] appears in the upper left corner of the screen.
The angle from the center of measurement range is displayed in the lower left corner of the screen.

ZERO SET
X = +2'15"
Y = ‑8'10"

See Section 5.3 for definitions of centers (optical center, center of measurement range and the center oftolerance).

70

SG10-0069-001

9.4. ZERO RESET
Set the center of measurement in the center of measurement range.
ZERO RESET OKCANCEL

1) OK
2) CANCEL：The center of measurement is changed to the center of measurement range.
：The center of measurement remains unchanged.

9.5. THRESHOLD
Set the luminance threshold.
THRESHOLD

1) LEVEL
2) MAX %

LEVEL
MAX %

：Set the threshold between 30~254.
：Set luminance 1~99% of the maximum luminance as the threshold.

･Example of MAX % setting
Maximum
Minimum
Input ValueMAX %MAX=099
MIN=001
090

Saturated Pixels

Max. Brightness

Luminance Level Bar
MAX:254

S:14

ENT to Set

Setting Screen

71SG10-0069-001

9.6. NOIZE CHK.
Set the luminance judgment of the sub-beam.
HIGH
NOIZE CHK. ON
OFF LOW

１）ON

2）OFF

：Sub-beam luminance judgment is performed and set.
HIGH ：Set the upper limit of luminance (NG if exceeded).
LOW ：Set the lower limit of luminance (NG if not reached).
：No Sub-beam luminance judgment.

● Setting screen for luminance judgment“H” represents the upper limit; “L” represents the lower limit.

3BEAM
HIGH.

L

H

Upper limit point

Lower limit point

Select HIGH or LOW and move the point using “↑” and”↓” key.
OK is returned when the measured luminance falls between H and L.
NG is returned in other conditions.

72SG10-0069-001

9.7. TOLERANCE
Set the judgment range of the main beam.
TOLERANCE

1) CIRCLE
2) X-Y
3) OFFCIRCLE
X‑Y
OFF: Set the circle (oval) tolerance.
Set the angle X and Y that is center of measurement-centered.
: Set the square tolerance.
Set the angle X and Y that is center of measurement-centered.
: No judgment processing･Setting the tolerance
The CIRCLE setting screen and the X-Y setting screen are identical.
Set X (horizontal width) and Y (vertical width).
3BEAM
TOLERANCE
X :+015'00"
Y :+006'00"

Maximum
Minimum

MAX= 030'00"
MIN= 000'04"
015'00"sec

Input Value73

SG10-0069-001

9.8. θ ANGLE
Setting of the judgment range for the tilt angle for sub-beam light.
BASIS
AVERAGEJUDGE RANGEJUDGE OFFBAR RANGEBAR OFFθANGLE

1) BASIS：Set the basic tilt angle.
Setthe tilt angle between ±90.000°.
3 BEAM MEAS.: Measure athe angle that is connected between the
sub-beam (2nd. and 3rd. spot) when spots are over 3.
And set the basic tilt angle with [ENT] key.
2 BEAM MEAS.: Measure the angle that is connected each 2 spots and set thebasic tilt angle with [ENT] key.
VALUE
: Enter the basic tilt angle.
：Set the averaging method.
4：Calculate the tilt angle from 4 continuous moving averages.
6：Calculate the tilt angle from 6 continuous moving averages.
8：Calculate the tilt angle from 8 continuous moving averages.
OFF ：Averaging is not performed.
：Set the tilt range.
The tilt must be set between 0.001〜90.000°.
：No tilt judgment.
：Set the bar display range.
Bar display range must be set between 0.10〜１0.00°.
：No Bar display.

2) AVERAGE

3) JUDGE RANGE
4) JUDGE OFF
5) BAR RANGE
6) BAR OFF

3BEAM

NG
AVG
+1
‑1

１）BASISdeg
θDelta= ‑10.253
θ±1 = ‑10.253
θBasis= 0.000
MENU to End

３）JUDGE RANGE
±5.00

74

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9.9. LOAD
Reading out setting data
1
2
3
4
5

LOAD

1) 1~5：Load data from the selected number.
An error is returned when no data have been saved under the selected number.

(Note)･Default settings assuming the use of the Laser Auto Collimator are stored in FILE1 before shipmentfrom the factory.
･Load FILE1 when you wish to return to default settings.
* Each file contains angle calibration data in addition to the conditions of measurement.
Measurement conditions can be saved for up to five auto collimators having different ranges ofmeasurement.

9.10. SAVE
Saving setting dataSAVE1) 1~512
3
4
5：Angle measurement conditions and system data are saved under the selected number.

(Note)･Default settings assuming the use of the Laser Auto Collimator are stored in FILE1 before shipmentfrom the factory.
* Each file contains angle calibration data in addition to the conditions of measurement.
Measurement conditions can be saved for up to five auto collimators having different ranges ofmeasurement.

75

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10. Angle Calibration
10.1. About Angle Calibration
Angle calibration is a series of steps followed to determine the angle displacement per pixel of the Laser Auto
Collimator’s CCD camera (pixel resolution).

Optical Parallel：HS-0
Wedged Substrate：HS-

Angle calibration requires a parallel mirror (HS-0) to define the parallelism and a wedged substrate (HS-□□□ orother standard substrates) to define the angle standard.
Center of measurement

SET UP

Standard angle displacement
Detected light

SET UP Screen
Angle of wedged substrate (deg)Detected light from SET-UP - Center of measurement range(pixel)

76＝ Angle per pixel(deg / pixel)

SG10-0069-001

10.2 Flow of Angle Calibration
This chart shows the flow of operation for using a new laser autocollimator or performing angle calibration.
Angle calibration requires a parallel mirror (HS-0) to define the parallelism and a wedged substrate to define theangle standard (HS-□□□ or other standard substrates that meet the Laser Auto Collimator range).
Power ON
Set parallel mirror

SYSTEM

3.4

Calibration Value Input

Turn power on
Set the parallel mirror on the reference plane of the stand, etc,
and adjust the 2-axes tilt stage to capture the detected light.
Wipe the setting surface to keep dust from between thereference plane and optical elements.
Show System menu

CALIBRATE

Select CALIBRATE to start calibration.
Select the auto collimator range.

Calibration
Measurement

Enter existing calibration value or perform newcalibration.

Adjust parallel mirror

Adjust so that the detected light is at the optical center and set
the measurement range. Wipe the setting surface to keep dust
from between the reference plane and optical elements.

CENTER

Set the measurement origin.

WEDGE ANGLE

Set Wedged Substrate +Parallel Mirror *1

Enter the wedged substrate angle.

Set the wedged substrate on the reference plane, andset the parallel mirror on the wedged substrate.
*1 or Wedge mirror

SET UP

Calculate the calibration value from the angle of the wedge
substrate.

SAVE

Save the settings for angle calibration.

(Note)･Set the distance from the laser output of the Laser Auto Collimator to the parallel mirror to the object
measurement distance written in the catalog.
･When using a wedged substrate, place the parallel mirror on the wedged substrate and verify that only one light
dot is in view before making any adjustments. If you are using a wedged mirror, proceed without parallel mirror.
･Default settings assuming the use of the Laser Auto Collimator are stored in FILE1 before shipment from thefactory. Load them as needed.
･Do not overwrite FILE1. Otherwise, all default settings will be lost.

77SG10-0069-001

10.3. Calibration Menu (SYSTEM-CALIBRATE)
10.3.1 CALIBRATEThe measurement range of the Laser Auto Collimator is set as shown below (not a software technique to change
the scaling factor).
・The measurement range is set to the Laser Auto Collimator head before shipment from the factory.
・A new measurement range must be set when using a new Laser Auto Collimator or when performing a new
angle calibration.
・Select and proceed to angle calibration immediately.
・Save calibration to complete the angle calibration.
・This setting can only be achieved while in reflection measurement mode (not in external incidence measurementmode). See “1.2.2 External Incidence Measurement” about the method of switching modes.
CALIBRATE 2.0
1.5
1.0
0.75
0.5
0.4
0.35
0.3
0.25
0.2
0.16

1) Select "CALIBRATE " on the Setting screen, and press [ENT] Key.
2) Select a Suruga Seiki’s Auto Collimator from the list (measurement range).
3) Press [ENT] key to select the calibration method (Section 10.3.2 Calibration Method Selection).
10.3.2 Calibration Method Selection
Select MEASURE (perform calibration) or VALUE (enter calibration value directly).
CALIBRATE 2.0
1.5
1.0
0.75
0.5
MEASURE
0.4
VALUE
0.35
0.3
0.25
0.2
0.16

1) MEASURE
2) VALUE：Perform calibration using wedges (Section 10.3.3 CENTER).
：Enter calibration values directly (Section 10.3.6 Calibration Value Input).

78

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10.3.3 CENTER
The center of measurement range is the center for angle calibration.
[CENTER] appears in the upper left corner of the screen when setting the center of measurement range.
CENTERX =47'38"
Y = ‑19'42"

ENT Key ：OK
MENU Key：Cancel

End to Key Click.

1) Normally set to the intersection of the green lines that coincides with the optical center
2) Press [ENT] key after the center of the spot lands on the intersection of the green lines.
3) Proceed to entering the wedged substrate or wedged mirror angles (Section 10.3.4 Input an Angle of Wedged
Substrate).
･Definition of centers
A. Optical center
The optical center is the unique center of an optical system of the Laser Auto Collimator. It is adjusted tothe center of the CCD built into the Laser Auto Collimator head.
The optical center is the intersection of the default green lines in Section 10.3.2 CENTER.
B. Zero point
The center of measurement range is the zero-point referenced in angle calibration.
The range is set per Section 10.3.2 after selecting Auto Collimator per Section 10.3.1. Normally, thecenter of measurement range should be alighned with the optical center (A) above.
C. Center of acceptance range
The center of acceptance range is the zero-point of measurement value.
Display with blue cross point.
B.Must be same spot center of measurement range and zero point at the setting center ofmeasurement range.
B.Can be shifted zero point with ZERO SET after setting center of measurement range.
D.Center of tolerance
Can be offset the center of tolerance (cente of pinc circle) from zero point at the only OFFSETTILT
mode.

79

SG10-0069-001

10.3.4 Input An Angle Of Wedged
Enter the wedged substrate or wedged mirror angle for angle calibration.
SYSTEM
WEDGE ANGLE
MAX= 030'00"
MIN= 000'04"
020'00"sec

Maximum
Minimum
Input Value

Key：Select Change
ENT Key：OK
MENU Key：Cancel
After entering the wedge angle, proceed to Section 10.3.5 for SET UP processing (to actually measure thewedged substrate or wedged mirror).

10.3.5 SET UP
Measure the wedged substrate + parallel mirror or wedged mirror.
Center of measurement range

SET UPX =47'38"
Y = ‑19'42"

Basic angle displacement
Detected light

End to Key Click.

* SET UP is processed on center of area
1) Confirm the spot from the wedged substrate + parallel mirror or wedged mirror (the wedged mirror is usedwithout the mirror).
2) Press [ENT] key to set the calibration angle.
3) Proceed to Section 10.3.7 to save the calibration data.
80SG10-0069-001

10.3.6 Calibration Value Input
Enter the calibration value directly without performing calibration.
SYSTEMCALIBRATION

Maximum
Minimum

MAX=0.500000
MIN=0.000001
0.002560
deg/pelInput value

Key：Select Change
ENT Key：OK
MENU Key：Cancel
1) Enter the calibration value (enter carefully as this affects the result of measurement).
2) Proceed to Section 10.3.7 to save the calibration data.

10.3.7 SAVE

This refers to saving the calibration data.
SET UP123451) Select a file number using [↑][↓] Keys.
2) Press [ENT] Key to save settings in the selected file.

(Note)･Optimum (default) settings assuming the use of the Laser Auto Collimator are stored in FILE1 before
shipment from the factory.
･Do not overwrite FILE1. Otherwise, all default settings will be lost.
* Each file contains angle calibration data in addition to the conditions of measurement.
Measurement conditions can be saved for up to five auto collimators having different ranges ofmeasurement.

81SG10-0069-001

11. Error Message
The error message is displayed under the left of the screen at the error.
Error Message List
Message

Content

Binarized object is nothing.

No optical spot is found.

Binarized objects are more than 2.

There are two or more spots.

Binarized objects are more than 4.

There are four or more spots.

Labels is insufficient.

The specified number of labels is not reached.

Brightness is saturated.

Brightness is saturated.

Max Brightness is Over.

The maximum brightness is exceeded.

Sub binarized object is nothing.

No ± sub-beam is found.

Sub binarized object is only one.

Only a single ± sub-beam is found.

Sub binarized objects are over.

There are three or more ± sub-beams.

Sub beam brightness is saturated.

Brightness of ± sub-beam is saturated.

Barycenter calculation failure.

The barycenter cannot be established.

Barycenter are more than 2.

There are two or more barycenters.

Area is larger than screen size.

The judgment range is larger than the screen size.

Setting ERROR!!

Angle calibration failed.

Measurement is interrupted.

Interrupted by key or I/O input.

FILE Nothing !!

No file has been saved.

Numeric input error!!

Abnormal value input.

Load ERROR!!

System data loading failed.

Load2 ERROR!!

Measurement data loading failed.

Save ERROR!!

Data save failed.

82

SG10-0069-001

12. External Control
12.1. Serial Interface
12.1.1 Communication modes
A. External Input Transmission Mode
The result of judgment is sent with the measured value at a rising edge of the HOLD input signal from theexternal I/O interface (See "12.4. I/O").
(Method of switching to External Input Transmission Mode)Set [DATA OUT] in Section 3.9 to [I/O].
B. Continuous Transmission Mode
This mode sends the results and measured values about 200ms.
(Method of switching to Continuous Transmission Mode)
The unit is set to External Input Transmission Mode (default) before shipping from the factory.
Set [DATA OUT] in Section 3.9 to [STREAM].
C. Remote Control Mode
A communication command sent from the host equipment enables reading the results and measured values,
writing settings, zero setting, etc.
(Method of switching to Remote Control Mode)Set [REMOTE] in Section 3.11.
See Section 12.2 for command details.

83SG10-0069-001

12.1.2 RS-232C Connector (Pin assignment)
The RS232C connector of HIP-1200 has the following pin-outs.
The RS232C cable for connecting to external equipment is a D-sub 9-pin cross cable.
Pins 7-8 are jumped internally.

HIP-1200 side (DE-9P-N(JAE))
Pin NoSignalComment
1
2
RxD
Receive Data
3
TxD
Send Data
4
5
GND
6
7
RTS
Request To Send
8
CTS
Clear To Send
912.1.3 Communication Requirements･Baud Rate
： 9600, 19200, 38400, 57600 bps･Data Bit
： 8bit･Parity： None･Stop Bit
：1･Flow Control ： None84

SG10-0069-001

12.2. Communication Commands･Communication Commands ListNo
ID CodeFunction

Post-processing

1

W000

Zero reset

Send ACK after zero reset

2

W001

Zero set

Send ACK after zero set

3

W003

Switch measurement functions

Send ACK after mode change

4

W010

End measurement

5

W011

Start measurement

6

W020

Remote OFF

Send ACK after remote OFF

7

R022

Read calibration value

Send calibration value

8

W022

Change calibration value

Send ACK after changing calibration value

9

W030

Save fileSend ACK is save successful

10

W031

Switch load files

Send ACK after load and functional change issuccessful

11

R032

Load system data

Send system data

12

W032

Set system data

Send ACK after system data change

13

R*00

Read measured values

Send measured values

14

R*01

Load a set value

Send specified data

15

R*02

Load all set values

Send all settings

16

W*01

Change a set value

Send ACK after changing the specified item

17

W*02

Change all set values

Send ACK after change

18

W111

Change OFFSETTILT judgment1

Send ACK after change

19

W112

Change OFFSETTILT judgment2

Send ACK after change

20

W310

Switch 3 BEAM main beam measurement Send ACK after change

21

W311

Switch 3 BEAM sub-beam measurement

Send ACK after change

22

W321

Perform 3 BEAM averaging

Send ACK after change

23

W322

Cancel 3 BEAM averaging

Send ACK after change

Send ACK after the end of runout
measurement
Send ACK after the start of runout
measurement*：1：Angle Measurement，2： Runout Measurement，3：3BEAM Measurement* The command structure of HIP-500 is supported.
No
ID CodeFunction
1
RA
Read measured values
2
RC
Read current settings
3
WA
Zero set4
WB
Set tolerance circle range
5
WC
Set tolerance square range
6
WD
Set binary threshold
7
WE
Save file
8
WF
Zero reset9
WG
Set noise level

Post-processing
Send measured values
Send current settings
Send ACK after zero set
Send ACK after setting tolerance circle
Send ACK after setting new tolerance square
Send ACK after setting binary threshold
Send ACK is save successful
Send ACK after zero reset
Send ACK after setting new noise level85SG10-0069-001

12.3 Communication format
12.3.1 External Input Transmission Mode and Continuous Transmission Mode
Ex) External input
HIP-1200

HOST
Input HOLD

Delay time
200msec max.

Output result of measurement

Ex) Continuous transmission
HIP-1200

HOST

Output result of measurement
Output result of measurement

200ms cycle

Output result of measurement

Single angle measurement and runout measurement data are sent in the communication format shown below.

HIP1200

G

,

*S

,

*X

,

*Y

,

*D

,

CR

LF

G： Header―*S： Judgment result “ O ”(OK),”N ”(NG)，”E ”(ERROR)

*X :
*Y :
*D :

±

0

.

0

0

0

±

0

.

0

0

0

SP

0

.

0

0

0

[SP] Space Character

The format of the measured angle data (*X, *Y, *D, etc) varies by the selected unit display.
deg

min+sec

mrad

±

0

.

0

0

0

±

0

0

0

0

0

±

0

0

.

0

0

±

0

.

0

0

0

±

0

0

0

0

0

±

0

0

.

0

0

SP

0

.

0

0

0

SP

0

0

0

0

0

SP

0

0

.

0

0

(Note)･When judgment is E, measurements are “999999".
86

SG10-0069-001

Multi-spot (relative) measurement data are sent in the communication format shown below.
HIP1200

G

,

*S

,

*X

,

*Y

,

*D

,

*L1

,

*L2

,

*L3 CRLF

G： Header―*S： Judgment result “ O ”(OK),”N ”(NG)，”E ”(ERROR)

*X :
*Y :
*D :
*L :

±

0

.

0

0

0

±

0

.

0

0

0

SP

0

.

0

0

0

SP

0

.

0

0

0

[SP] Space Character(Note)･When judgment is E, measurements are “999999".
･L1, L2, and L3 are left absent when there is only a single spot.
･L2 and L3 are left absent when there are two spots.

Multi-spot (absolute) measurement data are sent in the communication format shown below.

HIP1200

G,*S, *X1 , *Y1 , *D1 , *X2 , *Y2 , *D2 , *X3 , *Y3 , *D3 CR LF

G： Header―*S： Judgment result “ O ”(OK),”N ”(NG)，”E ”(ERROR)

*Xn :
*Yn :
*Dn :

±

0

.

0

0

0

±

0

.

0

0

0

SP

0

.

0

0

0

[n] Label Number[SP] Space Character(Note)･When judgment is E, measurements are “999999".
* When a label other than an error exists, the label outputs measured value.
･When only a single spot exists, X2 and subsequent data fields are left absent; when there are only
two spots, X3 and subsequent data fields are left absent.

87SG10-0069-001

3 BEAM main beam measurement data are sent in the communication format shown below.
HIP1200

G

,

*S

,

*X

,

*Y

,

*D

,

CR

LF

G： Header―*S： Judgment results “ O ”(OK),”N ”(NG)，”E ”(ERROR)

*X :
*Y :
*D :

±

0

.

0

0

0

±

0

.

0

0

0

SP

0

.

0

0

0

[SP] Space Character(Note)･When judgment is E, measurements are “999999".

3 BEAM sub-beam measurement data are sent in the communication format shown below.
HIP1200

G

,

*S

,

*T1

,

*T2 CR LF

G： Header―*S： Judgment results “ O ”(OK),”N ”(NG)，”E ”(ERROR)
*T1 :

±

0

0

.

0

0

0

*T2 :

±

0

0

.

0

0

0

or

SP

±

0

.

0

0

0

SP

±

0

.

0

0

0

[SP] Space Character
T1：Difference from basic θ angle
T2： θ angle of ± sub-beam(Note)･When judgment is E, measurements are “999999".

88

SG10-0069-001

12.3.2 Remote Control Mode
Ex) Read measured value
HIP-1200

HOST"R100"

Delay time
200msec max.

"R100"+ Output resultEx) Zero set
HIP-1200

HOST"W001"

Execute zero set"W001"(ACK) *1*1 An error command is returned if communication error exists.

Read Measured Value
Values from current angle measurement, runout measurement or 3 BEAM measurement are outputted.
The sample response indicates an angle measurement (single spot measurement).
The response follows the same format after the identifier (G).
HOST

R

*

0

0

CR LF
R

HIP-1200

*

0

0

,

*S

,

*X

,

*Y

,

*D

LF

* : Symbol 1：Angle Measurement，2：Runout Measurement，3：3 BEAM Measurement*S : “ O ”(OK),”N ”(NG)，”E ”(ERROR)
*X :

±

0

.

0

0

0

*Y :

±

0

.

0

0

0

*D :

SP

0

.

0

0

0

[SP] Space Character（注）・Values are displayed in the unit as set from the menu.
・When external incident is set, the range of reflection measurement is twice as broad as the standrad
setting using an internal light source.

89

CR LF

SG10-0069-001

Read Calibration Data
Calibration data is output.
HOST

R

0

2

2

CR

LF
R

HIP-1200*1 : Calibration data

0

.

0

0

0

2

2

0

0

,

*1

0

CR LF

0

Read System Data
System data is output.
HOST

R

0

3

2 CR LF

HIP-1200

R

0

0

3

2

,

*1

,

*2

,

*3

,

*4

,

*5

*1 : BINARY

2030~254*2 : LAC TYPE

0

1

*3 : ROTATION

00:OFF，1: 90° CCW，2: 90° CW*4 : MIRRORING

0

0:X-Y OFF，1:X ON，2:Y ON，3:X-Y ON*5 : DISPLAY

1

0:OFF，1:ON (display measurement results)*6 : UNIT

1

0:deg，1:min+sec，2:mrad*7 : DATA OUT

1

0: Stream, 1: I/O input

0~11（0.16~2.0）

90

,

*6

,

*7 CR LF

SG10-0069-001

Reading measurement setting data individually
Current measurement setting data are outputted on the item by item basis.
HOST

R

*

0

1

,

*1 CR LF
R

HIP-1200*1 : Item code

下*1

*2 : Setting

*2

*

0

1

*2 CR

,

LF

Item code list (shown below)
Varies by the item

Item Code List
No

Code

1

01

2

Item Name

No

Code

Binarization level

26

2B

Measurement range width W

02

Noise level

27

2C

Measurement range width L

303

Criteria

28

2D

Method of main beam threshold calculation

4

04

Circle - Radius

29

2E

Main beam threshold

505

Square - ＸＬ

30

2F

Main beam judgment style (circle or square)

6

06

Square - ＸＨ

31

2GMain beam measurement radius - X

7

07

Square -ＹＨ

32

2HMain beam measurement radius - Y

808

Square -ＹＬ

33

2I

Basic θ angle

9

09

Circle 2 - Radius

34

2J

Application of θ angle averaging

10

0A

Judgment X_Offset

35

2K

Application of θ angle for judgment

11

0B

Judgment Y_Offset

36

2L

θ angle for judgment

120C

Noise level judgment or not

37

2M

Application of graphic display of θ angle

13

0D

Noise level upper limit

38

2N

Range of graphic display of θ angle

140E

Noise level lower limit

39

20

Luminance judgment or not

15

20

Measurement object (single or multi-spot)

40

2P

Upper limit luminance16

21

Spot numbering method (area or angle)

41

2Q

Lower limit luminance17

22

Spot number for judgment

42

18

23

Method of center of gravity calculation

43

19

24

Application of averaging

44

20

25

Application of ZOOM

45

21

26

Sample size

46

22

27

Application of orbit width judgment

47

23

28

Method of orbit width calculation

48

24

29

Measurement range width X

49

25

2A

Measurement range width Y

50

91

Item NameSG10-0069-001
Reading all measurement setting data
Current setting is read out.
1) Angle Measurement
HOST

R 1 0

2 CR LF

HIP-1200

R

1

0

2

,

*1 ,

*2 , *3 , *4 ,*5 ,*6 , *7

,

*8

,

*9

, *10

, *11 , *12 , *13 , *14 , *15 , *16 , *17 , *18 , *19 , *20 CR LF*1 : BINARY

1

1

1

30~254*2 : NOIZE L-LEVEL

1

1

1

30〜254 or 30〜CLOW*3 : NOIZE CHIGH

1

1

1

CLOW〜254*4 : NOIZE CLOW

1

1

1

30〜CHIGH*5 : NOIZE CHECK

0*6 : AREA

±

0

.

1

0

0

0:OFF，1:Circle，2:Square*7 : CIRCLE

±

0

.

1

0

0

0.001~LAC angle*8 : X-Y-XL

±

0

.

1

0

0

-LAC angle~XH*9 : X-Y-XH

±

0

.

1

0

0

XL~LAC angle*10 : X-Y-YH

±

0

.

1

0

0

YL~LAC angle*11 : X-Y-YL

±

0

.

1

0

0

-LAC angle〜YH*12 : CIRCLE2

±

0

.

1

0

0

0.001~LAC angle*13 : X-OFFSET

±

0

.

1

0

0

-LAC angle~0.000~LAC angle*14 : Y-OFFSET

±

0

.

1

0

0

-LAC angle~0.000~LAC angle*15 : LABEL SEL.

1

*16 : NUMBERING

1

0:OFF，1:ON

0: Single-spot，1：Multi-spot (relative)，
2：Multi-spot (absolute)

Ascending order of angles*17 : NUMBER*18 : MODE
*19 : AVERAGE

0: Descending order of areas，1:1
10:ALL，1:1，2:2，3:3
0:Center of area，1:Luminance centroid，

1

2:Luminance peak1

0:OFF，1: 2 times，2: 4 times，3:8

times*20 : ZOOM

0:OFF，1: X4，2: X8，3:X16

92

SG10-0069-001

2) Runout Measurement
HOST

R

2

0

2 CR LF
R

HIP-1200

2

0

2

,

*1

,

*2

,
,

*3
*8

,
,

*4
*9

,
,

*5

*10

*1 : SAMPLE

9

9

9

1~999

*2 : BINARY

2

5

3

30~254*3 : AREA

1*4 : CIRCLE

±

0

.

1

0

0

0.001~LAC angle*5 : X-Y-XL

±

0

.

1

0

0

-LAC angle~XH*6 : X-Y-XH

±

0

.

1

0

0

XL~LAC angle*7 : X-Y-YH

±

0

.

1

0

0

YL~LAC angle*8 : X-Y-YL

±

0

.

1

0

0

-LAC angle~YH*9 : WIDTH

0

0：OFF，1：ON*10 : CALC MODE

0

0：FILL，1：FEAT*11 : wX

SP

0

.

1

0

0

0.001~LAC angle

SP

0

.

1

0

0

0.001~LAC angle*12 : wY

SP

0

.

1

0

0

0.001~LAC angle

: wL

SP

0

.

1

0

0

0.001~LAC angle

: wW

,

,

*6

*11

,

0:OFF，1: Circle，2: Square[SP] Space Character

93

,

*7

*12 CR LF

SG10-0069-001

3) 3 BEAM Measurement
HOST

R

3

0

2 CR LF
R

HIP-1200*1 : MODE

1*2 : THRESHOLD

1

3

0

2

,

*1

,

*2

,

*3

,

*4

,

*5

,

*6

,

,

*8

,

*9

,

*10

,

*11

,

*12

,

*13

,

*14 CR LF

0:Level，1:Max%
0

Threshold (30〜254 or 12〜99)

0*3 : NLEVEL HIGH

Upper limit（lower limit〜4）*4 : NLEVEL LOW

Lower limit（１〜upper limit）*5 : NLEVEL FLG

0:OFF，1:ON*6 : AREA

0

0:OFF，1:Ellipse，2:Square*7 : X

0

.

5

0

0

0.001〜LAC angle*8 : Y

0

.

5

0

0

0.001〜LAC angle*9 : θBASIS

‑

9

0

.

0

*10 : AVERAGE

10:OFF，1:4，2:6，3:8*11 : JUDGE ON/OFF

1

0:OFF，1:ON*12 : JUDGE RANGE

1*13 : BAR ON/OFF

1*14 : BAR RANGE

SP

0

.

0

0

0

.

1

0

0

0

0

-90.000〜90.000

0.001〜90.000
0:OFF，1:ON

94

0.10〜10.00*7

SG10-0069-001

Zero Set
This sets the zero point to the detected light in the monitor.
HOST

W

0

0

0 CR LFW

HIP1200

0

0

0 CR LF

Zero ResetThis sets the zero point to the center of the monitor.
HOST

W

0

0

1 CR LF

HIP1200

W

0

0

*1

CR LF

1 CR LF

Function Change
It changes to the measurement function.
HOST

W

0

0

3

,

W

HIP1200

0

0

3

CR

LF

*1 : Mode 1: Angle Measurement， 2: Runout Measurement，3: 3 BEAM Measurement

Measurement Stop
The measurement is stopped.
HOST

W

0

1

0

CR LF

HIP1200

W

0

1

0

CR LF

W

0

1

1

CR LF

W

0

2

0

CR

Measurement Start
The measurement starts.
HOST

W

0

1

1

CR LF

HIP1200

Remote Off
A remote controlled function is released.
HOST
HIP1200

W

0

2

0

CR

LF

95

LF

SG10-0069-001

Calibration Data Change
The calibration data is changed.
HOST

W

0

2

2

,

*1

CR LF
W

HIP1200*1 : Calibration data

0

.

0

0

0

0

2

2

CR LF

0

0

0

0

CR

LF

W

0

3

File Save
This saves the current settings in the specified file (1 File No 5)
HOST

W

0

3

0

,

*1

CR LF
W

HIP1200

0

3*1 : File No 1~5File Load & Function Change
Change to the specified file and specified measurement function.
HOST

W

0

3

1

,

*1

,

*2

CR LF

HIP1200

1

CR LF*1 : Load file number 1~5*2 : Mode 1: Angle Measurement, 2: Runout Measurement, 3: 3 BEAM Measurement

System Data Change
The system data is changed.
HOST

W

0

3

2

,

*1

,

*2

,

*3

,

*4

,

*5

,

*6

,

時間

*7 CR LFW

HIP-1200*1 : BINARY

2

0*2 : LAC TYPE

0

1

*3 : ROTATION

00:OFF，1: 90° CCW，2: 90° CW*4 : MIRRORING

0

0:X-Y OFF，1:X ON，2:Y ON，3:X-Y ON*5 : DISPLAY

1

0:OFF，1:ON（display measurement results）*6 : UNIT

1

0:deg，1:min+sec，2:mrad*7 : DATA OUT

1

0: Stream，1: I/O input

030~2540~11（0.16~2.0）

96

0

3

2 CR LF

SG10-0069-001

Changing settings individually
Current measurement setting data are changed by each items.

HOST

W

*1

0

1

,

*2

,

*3

CR

LF
W

HIP1200

*1

0

1

CR

LF

*1 : Identifying code

1: Angle Measurement, 2: Runout Measurement, 3: 3 BEAM Measurement*2 : Item code

Item code list (shown below)*3 : Change value

Change value of the specified item

Item Code List
No

Code

1

01

2

Item Name

No

Code

Binarization level

26

2B

Measurement range width W

02

Noise level

27

2C

Measurement range width L

303

Criteria

28

2D

Method of main beam threshold calculation

4

04

Circle - Radius

29

2E

Main beam threshold

505

Square−ＸＬ

30

2F

Main beam judgment style (circle or square)

6

06

Square−ＸＨ

31

2G

Main beam measurement radius - X

7

07

Square−ＹＨ

32

2H

Main beam measurement radius - Y

808

Square−ＹＬ

33

2I

Basic θ angle

9

09

Circle 2 - Radius

34

2J

Application of θ angle averaging

10

0A

Judgment X_Offset

35

2K

Application of θ angle for judgment

11

0B

Judgment Y_Offset

36

2L

θ angle for judgment

120C

Noise level judgment or not

37

2M

Application of graphic display of θ angle

13

0D

Noise level upper limit

38

2N

Range of graphic display of θ angle

140E

Noise level lower limit

39

20

Luminance judgement or not

15

20

Measurement object (single or multi-spot)

40

2P

Upper limit luminance16

21

Spot numbering method (area or angle)

41

2Q

Lower limit luminance17

22

Spot number for judgment

42

18

23

Method of center of gravity calculation

43

19

24

Application of averaging

44

20

25

Application of ZOOM

45

21

26

Sample size

46

22

27

Application of orbit width judgment

47

23

28

Method of orbit width calculation

48

24

29

Measurement range width X

49

25

2A

Measurement range width Y

50

97

Item NameSG10-0069-001

Changing all settings
All measurement setting data are changed as a group.
1) Angle Measurement
W 1

0

HOST HOST2, *1 , *2 , *3 , *4 , *5 , *6 , *7 , *8 , *9 , *10, *11 , *12 , *13 , *14 , *15 , *16 , *17 , *18 , *19 , *20 CR LF
W

1*1 : BINARY

1

1

1

30~254*2 : NOIZE L-LEVEL

1

1

1

30〜254 or 30〜CLOW*3 : NOIZE CHIGH

1

1

1

CLOW〜254*4 : NOIZE CLOW

1

1

1

30〜CHIGH*5 : NOIZE CHECK

0*6 : AREA

±

0

.

1

0

0

0:OFF，1:円，2:Square*7 : CIRCLE

±

0

.

1

0

0

0.001~LAC angle*8 : X-Y-XL

±

0

.

1

0

0

-LAC angle~XH*9 : X-Y-XH

±

0

.

1

0

0

XL~LAC angle*10 : X-Y-YH

±

0

.

1

0

0

YL~LAC angle*11 : X-Y-YL

±

0

.

1

0

0

-LAC angle〜YH*12 : CIRCLE2

±

0

.

1

0

0

0.001~LAC angle*13 : X-OFFSET

±

0

.

1

0

0

-LAC angle~0.000~LAC angle*14 : Y-OFFSET

±

0

.

1

0

0

-LAC angle~0.000~LAC angle*15 : LABEL SEL.

1

*16 : NUMBERING

10

2 CR LF

0:OFF，1:ON

0: Single-spot, 1：Multi-spot (relative),
2：Multi-spot (absolute)

Ascending order of angles*17 : NUMBER*18 : MODE
*19 : AVERAGE

Descending order of areas ， 1:

1
1

0:ALL，1:1，2:2，3:3
0:Center of area，1:Luminance centroid，

1

2:Luminance peak1

0:OFF，1: 2 times，2: 4 times，3:8

times*20 : ZOOM

0:OFF，1: X4，2: X8，3:X16

98

SG10-0069-001

2) Runout Measurement
W 2

0

2

,

*1

,

*2
,

HOST

,

*7

*3
,

,

*8

*4
,

,

*9

*5

,

*6

, *10 , *11 , *12 CR LF
W 2

HIP1200*1 : SAMPLE

9

9

9

1〜999

*2 : BINARY

2

5

3

30〜254*3 : AREA

1*4 : CIRCLE

±

0

.

1

0

0

0.001~LAC angle*5 : X-Y-XL

±

0

.

1

0

0

-LAC angle~XH*6 : X-Y-XH

±

0

.

1

0

0

XL~LAC angle*7 : X-Y-YH

±

0

.

1

0

0

YL~LAC angle*8 : X-Y-YL

±

0

.

1

0

0

-LAC angle~YH*9 : WIDTH

0

0：OFF，1：ON*10 : CALC MODE

0

0：FILL，1：FEAT*11 : wX

SP

0

.

1

0

0

0.001~LAC angle

SP

0

.

1

0

0

0.001~LAC angle*12 : wY

SP

0

.

1

0

0

0.001~LAC angle

: wL

SP

0

.

1

0

0

0.001~LAC angle: wW

0:OFF，1:Circle，2:Square[SP] Space Character

99

0

2 CR LF

SG10-0069-001

3) 3 BEAM Measurement

W

3

0

2

HOST

,

,

*1

,

*2

,

*3

,

*4

,

*5

,

*6

*8

,

*9

,

*10

,

*11

,

*12

,

*13

,

,

*7

*14 CR LF
W

HIP-1200*1 : MODE

1*2 : THRESHOLD

1

3

0

0:Level, 1:Max%
0

Threshold（30〜254 or 12〜99）

0*3 : NLEVEL HIGH

Upper limit（lower limit〜4）*4 : NLEVEL LOW

Lower limit（１〜upper limit）*5 : NLEVEL FLG

0:OFF，1:ON*6 : AREA

0

0:OFF，1:Ellipse，2:Square*7 : X

0

.

5

0

0

0.001〜LAC angle*8 : Y

0

.

5

0

0

0.001〜LAC angle*9 : θBASIS

‑

9

0

.

0

*10 : AVERAGE

10:OFF，1:4，2:6，3:8*11 : JUDGE ON/OFF

1

0:OFF，1:ON*12 : JUDGE RANGE

1*13 : BAR ON/OFF

1*14 : BAR RANGE

SP

0

.

0

0

0

.

1

0

0

0

0

-90.000〜90.000

0.001〜90.000
0:OFF，1:ON

100

0.10〜10.00

2 CR LF

SG10-0069-001
OFFSETTILT Switch to the judgment 1
Switch the tolerance from judgment range 2 (d1,d2,X-Y) to judgement range 1 (d1) at the OFFSETTILT
measurement.
Host
Time
W 1 1 1 CR LF
W

HIP1200

1

1

1

CR LF

OFFSETTILT Switch to the judgment 2
Switch the tolerance from judgment range 1 (d1) to judgment range 2 (d1,d2,X-Y) at the OFFSETTILT
measurement.
Host
Time
W 1 1 2 CR LF
W

HIP1200

3

1

1

CR LF

Main-beam Measurement Change
Operation changes from 3 BEAM sub-beam to main beam measurement.
HOST

W

3

1

0 CR LFW

HIP1200

3

1

0 CR LF

Sub -beam Measurement Change
Operation changes from 3 BEAM main beam to sub-beam measurement.
HOST

W

3

1

1 CR LFW

HIP1200

3

1

1 CR LF

Averaging of 3 BEAM measurement
Averaging of 3 BEAM sub-beam measurement is performed.
HOST

W

3

2

1 CR LFW

HIP1200

3

2

1 CR LF

Cancelling the averaging of 3 BEAM measurement
Averaging of 3 BEAM sub-beam measurement is cancelled.
W

HIP1200

3

2

2 CR LF
W

3

2

101

2 CR LF

SG10-0069-001

Communication errors
An error is returned from the unit in the format shown below when the command fails to receive or
execute normally.
HOST

*

*

*

*

CR

LF
E

HIP1200

R

,

*1

CR

LF

*Error codes and types at
1: Communication error･92 or more characters received between ID Code character and [CRLF]･No characters received within 1 second after ID Code is received･Overrun error or framing error
2: Setting data error･A set value falls outside of the setting range（When Setting command is used, this error may occur when the relative size is invalid.）
3: Command format error･The number of characters between ID Code character and [CRLF] is invalid･Setting data is missing or characters other than numeric characters are used in Set type command･The character following ID Code is not in the above list
4: Execution error
・Zero set failed during “WA” command execution as no light dot was detected.
・No data have been saved under the specified file number.

102

SG10-0069-001

12.4. Data Collection Software
Data Collection Software is an Excel macro program for receiving results of measurement that are sent by serial
output.
The software can be downloaded from Suruga Seiki OST Division’s homepage (http://www.surugaost.jp/).
12.4.1 Operating environment and operation
You will need Microsoft(R) Excel 2000 or later versions to run the software. You will also need a D-sub 9-pin
cross cable for connection to the PC.
12.4.2 Start
Start Microsoft(R) Excel file “HIP-1200 Communication with macros enabled.
12.4.3 Setting (See "12.1 Serial Interface" about setting in the image processor side)
(a)
(b)
(c)
(d)
(e)
(f)

(a) COM
Set the COM port number of the PC connected to HIP-1200.
(b) Baud rate
Set the baud rate of communication set on the HIP-1200.
(c) Sampling time (ms)
Set the interval for acquiring results of measurement sent continuously from the HIP-12500.
(d) Mode
SINGLE: Receive data for a single result when START button is pressed; end when reception is completed.
* Enabled only when the HIP-1200 is in Remote Control mode.
CONT: Receive data from the HIP-1200 when START button is pressed; continue receiving data until END
button is pressed (up to the end line on Excel; 65535th line on Excel 2000).
* Enabled only when the HIP-1200 is in "STREAM" mode and set for continuous transmission.
(e) Start button
Press “Start Communication” button in Microsoft(R) Excel file “HIP-1200 Communication to start receiving data.
(f) End button
Press “End Communication” button in Microsoft(R) Excel file “HIP-1200 Communication to end receive data.

103

SG10-0069-001

12.5. I/O
The zero point setting and serial output of measured values are enabled when the input terminal pins A, B, D and
the COM terminal pin E are shorted or open-ended.
The NG output from pin C will remain as long as NG decision lasts.
Pin D allows runout measurement to start.
12.5.1 Operation Timing Chart
*1

*1

*1

*1

*1

NG
Decisionthreshold
OK
Time
Start measurement
Power
ZeroSet input (A)Hold input (B)NG output (C)Serial output(Ext. input
transmission mode)
Serial output(Continuoustransmission mode)

NG
ER OK

ER OK OK OK ER ER NG

OKER OK OKNG ER ER ER*1: Period without detected light(Note)
・Input signals must remain ON for at least 100ms.
・Delay of NG output: There may be a delay of 200ms maximum from the Hold input signal to theregistration of NG output signal.

104

SG10-0069-001

12.5.2 Electrical Specification
Output: Max Load Current 100mA, Max Voltage 30VDC, Residual Voltage 1.2V and less
Input must be achieved by shorting (ON) or open-ending (OFF) the input terminal pins (A, B, D) and COM
terminal pin (E). Use no-voltage contacts for shorting. No-voltage contacts must accept 5mA or higher current
with the leakage current of no higher than 0.1mA.
Internal
PC357
820
A
5.6k

B

Internal
DC12V

C
D
E

PC357
820

I/O

Internal
5.6k

TLP12

Internal

Pin No.
Signal NameA
ZERO Set Input
B
Hold Input
CNG Output
D
Measurement Start(Runout Measurement Onry)E
Common (Internal 0VDC)

PC357
820
5.6k

Connector Model：R03-R5F (Tajimi Electronics)
Compatible Connector Model：R03-PB5M (Tajimi Electronics)
Enlarged view of the connector

A

Photograph of the compatible connector

E

B

D
C

105

SG10-0069-001

13. Troubleshooting
Case
No power supply

Probable CausesCountermeasure

AC adapter is disconnected.

Securely connect to the wall outlet.

No light spot displayed Connector cable is disconnected
Connect the cable correctly.
in the screen
Laser ON/OFF switch is set to OFF. Set laser ON/OFF switch to ON.
End of the laser life

Contact Suruga Seiki.

Monitor display problem No images received from the auto Connect the cable correctly.
collimator.
Hard to detect laser light Reflectance of the object is too low. Adjust the variable aperture of the auto collimator orchange the light intensity using the volume.
Shutter speed is too slow.
Adjust the shutter speed by turning the shutter switchof the auto collimator.

106

SG10-0069-001＜Revision History＞
Edition

Date

First Edition

Revised Content

03/28/2008

New Documentnd2 Edition

04/22/2008

Section of luminance upper/lower judgement added (angle and
3-BEAM measurements)

3rd.Edition

05/13/2008

Basic tilt angle measurement function at the zero point addedth

4 Edition

05/27/2008

Explanation and definition of the zero point added
For 3 BEAM measurement screen displays change the place
The command format that switched judgment of OFFSETTIL added.

5th Edition

07/22/2008

Explanation of the ZERO SET different positionby centroid estimation.

107

For More Information Call to us:

SURUGA SEIKI CO., LTD.
Overseas Section, OST Division
3F KonanYKBldg,2,4,12,Konan,Minato-ku, Tokyo, 108-0075 Japan
TEL : +81-3-6711-5014
FAX : +81-3-6711-5021
URL : http://www.suruga-ost.com/
E-mail : e-ost@suruga-g.co.jp