Samco-Interview

Prof. Yasutaka Matsuo
Professor, Nanotechnology and DX Center, Research Institute forElectronic Science, Hokkaido University
In this interview, we visit the Research Institute for Electronic Science,
Hokkaido University, and talk with Prof. Yasutaka Matsuo about his research onnano, micro-fabrication technology and materials development at the interface.
Brief History
Mar. 1996			Mar. 2001			
Apr. 2001 – Sep. 2003
Oct. 2003 – Mar. 2004
Apr. 2004 – Jul. 2004
Aug. 2004 – Mar. 2007
Apr. 2007 – Dec. 2010
Jan. 2010 – Mar. 2018
Apr. 2018 –		Osaka University, Graduate School of Engineering, Bachelor's
Program (Bachelor of Engineering)
Hokkaido University, Graduate School of Engineering, Doctoral
Program (Doctor of Engineering)Researcher, Science and Technology Promotion Organization
Researcher, Hokkaido University
Postdoctoral Research Fellowships, Japan Society for the Promotionof Science
Assistant, Hokkaido University, Research Institute for Electronic
Science
Assistant Professor, Hokkaido University, Research Institute forElectronic Science
Associate Professor, Hokkaido University, Research Institute forElectronic Science
Present Professor, Hokkaido University, Research Institute forElectronic Science

We use microfabrication technology to create microstructures,for instance, micro pillars and pores, on the surface of diverse
materials, facilitating specific functionalities.
▶ Please introduce your current
research.
We use microfabrication technology
to create microstructures, for instance,
micro pillars and pores, on the surfaceof diverse materials, facilitating specificfunctionalities. A notable example is theongoing research in collaboration with Prof.
Hirai from Chitose Institute of Science andTechnology, where the study is centeredaround the manipulation of friction byintroducing these microstructures torubber surfaces. Such techniques show
potential in inhibiting snow accumulation
on structures such as signals and building
facades, a common issue in snowprone areas like Hokkaido. The primaryemphasis currently lies in manufacturing
devices with shape-controlled surfaces
and their integration into innovative
analytical chips. Additionally, as a partof the Advanced Research Infrastructure
for Materials and nanotechnology (ARIM)
initiatives, endorsed by the Ministry of
Education, Culture, Sports, Science andTechnology (MEXT), this team undertakes
the responsibility of facilitating users who
operate the communal equipment in theclean room of the CRIS - Creative ResearchInstitution of Hokkaido University.

vol.122 / 2023. JUL.

▶ Please tell us how you started yourresearch and how it has developed
up to the present.
Originating from the Kansai regionof Japan, my academic pursuit in theDepartment of Applied Physics at Osaka
University, recognized for its focus on
the study of light, began. A fascination
for light studies using lasers led me tothe laboratory of Prof. Hiroshi Masuhara,
who has since become my mentor. In theMasuhara laboratory, experiments on themovements of electrons within organic
molecules under laser light irradiation wereconducted.
After completion of my master’s
program, a temporary transition to thecorporate world occurred, only to befollowed by a return to academia, sparked
by conversations with Prof. Masuhara. A
new opportunity presented itself in the formof an invitation from Prof. Keiji Sasaki, anassistant professor at the Masuhara Lab,
who was establishing a new laboratory
at Hokkaido University. Consequently, amove to Hokkaido, a region previously
unknown to me, took place, bringing its
unique set of challenges. The recollectionof the entrance examination day for
my doctoral program remains vibrant,

chiefly due to the snowfall that painted
the exterior landscape white. My stint atthe Sasaki Laboratory centered aroundmicrospectroscopy, a technique used forspectroscopic analysis within microscopic
regions.
Following the culmination of my doctoral
studies, I secured a postdoctoral fellowshipin Prof. Kuniharu Ijiro’s laboratory at theResearch Institute for Electronic Science.
The primary focus of Professor Ijiro's work
was the development of highly functional
materials achieved through the accurateorganization of biomolecules at interfaces.
The research was predicated on aphenomenon: the formation of a monolayer
film on water, exploiting the attributes ofamphiphilic molecules comprising bothhydrophilic and hydrophobic groups. It
raised a compelling question: Would theanalytical approach to biomolecules alter
if their arrangement, structure, or theattachment of electrodes were varied?
In this context, I was introduced to themicrofabrication technology employedinsemiconductors,
atechnology
facilitating the creation of irregular, nonflat substrates to govern the configurationof biomolecules. At that time, due to theabsence of a clean room at Hokkaido
University, other universities’ laboratories
were requisitioned for our microstructure
processing. The research focus graduallytransitioned from the organization ofmolecules to the development of uniqueinterfaces using microfabrication andauxiliary methods.
In November 2003, the Hokkaido
University
witnessed
asignificant
development with the completion of
the CRIS Research Building, which1Samco-Interview
incorporated a state-of-the-art cleanroom. This clean room came equippedwith advanced tools like electron beamlithography, Samco’s CVD, and dry
etching equipment. At the outset, thepotential impact of microfabrication on
the ongoing research was not entirelyevident. However, with the expansion ofequipment accessibility and enhancementof processing and analysis capabilities,
microfabrication gradually assumed a more
pivotal role in the research conducted. Thiswas substantially influenced by knowledge
gleaned from other professors at theHokkaido University who are proficient inmicrofabrication techniques.
In 2007, the CRIS of Hokkaido University
joined the Nanotechnology Network,
now succeeded by ARIM through theNanotechnology Platform Project of theMEXT. Subsequent to this development,
the responsibility of supporting device
fabrication for researchers in various
companies and universities was conferred
upon the writer. This appointment also
marked the beginning of my focused workon microfabrication and structural analysis.
Whileoverseeing
nanotechnology
projects, a collaboration was undertakenwith Prof. Masatsugu Shimomura and otherresearchers in the domain of biomimetics,
also referred to as biomimetic technology.
This field procures inspiration from thedistinctive structures and functions inherent
to nature. These unique attributes arereplicated and employed in the creation ofnovel technologies. Prime instances of thisinclude the water repellency characteristicof lotus leaves and the adsorption
properties displayed by gecko feet. The
surface of lotus leaves possesses a certain
texture that repels water. Conversely,
geckos have the ability to ascend smooth,vol.122 / 2023. JUL.

vertical surfaces. This is a consequence ofvan der Waals forces operating between
molecules, which is a direct result of thearchitecture of the numerous microscopic
hairs on their feet. The research isconcentrated on the physicochemical
properties of these structures and aims toutilize a range of materials to duplicate thefunctions of water repellency and adhesion
by employing microfabrication techniquesand surface energy control.
▶ What led to the implementation of
the Atomic Layer Deposition (ALD)
system?
In 2011, the ALD system was introduced
by Prof. Hiroaki Misawa at the ResearchInstitute for Electronic Science. Prof.
Misawa believed the ALD system would
provide valuable contributions to researchin photochemistry. Since I was originallythe utilization of TiO2 in dielectric multilayer
films. In a particular instance, a multilayer
film with a thickness approaching 300
nm was deposited, resulting in a high-k
dielectric film.
▶ What were the reasons for theinstallation of Samco’s equipment,
and what are the opinions of it?
Hokkaido University operates twothermal ALD systems, which are utilizedby numerous researchers and engineersfrom various universities and companies.
This usage trend can be attributed to thefact that these systems permit users tobring their unique deposition precursors.
Upon disclosure of this provision, a surge
of inquiries was received, and with thesuccessful implementation of the systems,
there was an observable increase in
the variety of film types that could be

There is significant appreciation for Samco’s
contribution and high satisfaction with the swift
response time demonstrated by the company.
involved in photochemistry, I supported theintroduction of the system. At that juncture,
Samco did not offer ALD systems, which
necessitated procuring a system froma reputable Finnish manufacturer. Prof.
Misawa was engaged in research aiming
to actualize an artificial photosynthesis
system via localized plasmons, entities
capableoftemporarily
gatheringlight. Through the formation of gold
nanoparticles on an oxide semiconductor
substrate such as titanium dioxide,exhibiting plasmon resonance, light canbe used to induce an electrical separationof water into hydrogen and oxygen. Priorto this, single-crystal substrates were
exclusively used for managing thin films oftitanium dioxide. However, the high costs ofsingle-crystal substrates and the difficultyof fabricating thin films compatible with thestructure led to the decision to install an
ALD system. The goal was to investigate
oxide semiconductors and their structures,
especially as TiO2 was infrequently foundin films deposited by ALD systems atother Nanotechnology Network Centersin Japan. It was observed that SiO2, Al2O3,and HfO2 were primarily deposited at otherinstitutions.
Following the introduction of the ALDsystem, support has been extended to adiverse user base due to its availability at
the shared the CRIS Research Building
facility. Requests were received from lensand optical equipment manufacturers fordeposited. Concurrently, a demand wasnoticed for the deposition of films at
lower temperatures, necessitating theconsideration of plasma-enhanced ALD as
an alternative to thermal methods.
As considerations were made for theintroduction of a new plasma-enhanced
ALD system, the benefits of using novel
organometallic
precursors
becameapparent. Previously, difficulties wereencountered with reaction chambers
when a diverse range of precursors wasemployed.
Therefore, the introduction of anequipment capable of replacing thereaction chamber was proposed, ensuring
its reusability even after becoming dirty
during film deposition through a thoroughcleaning process. It was deemed essential
to ascertain the speed at which a company
could respond to these challenges.
Unfortunately,noALD
equipment
manufacturer seemed to offer thiscombination of features. Therefore, whena search was made for a company capableof customizing equipment and providing
adequate support, Samco was contacted.
Samco positively responded to thisrequest by not only replacing the reaction
chamber but also integrating a feature tovaporize and introduce organometallic
precursors by bubbling. There is significant
appreciation for Samco’s contribution andhigh satisfaction with the swift responsetime demonstrated by the company.

2Samco-Interview
idea generation. Furthermore, undertaking
interdisciplinary research expands one’snetwork of connections. Establishingassociations
withprofessors
fromdisparate academic societies, along with▶ Could you tell us what you keep inmind in your daily research?
The approach taken seeks to “broadeninterests.” Upon reflection, participation
has spanned various fields, commencing
withphotochemistryresearch,transitioning to the study of biomaterial
systems, regenerative medicine, cells,
among others, and currently focusing on
microfabrication technology. Engaging
in research across different fields
allowed the leveraging of knowledge andexperiences from diverse areas, while
recognizing shared phenomena andcommonalities. Although it is imperative todelve deeply into a singular field, the valueof undertaking research that straddles
multiple disciplines is equally emphasized.
Encouragement is extended to students
to cultivate diverse interests. It remains
unpredictable what may prove beneficial
in life, thereby increasing the chances ofscientific activities. Nonetheless, cooking
is often executed at a leisurely pace without
stringent adherence to these principles.
▶ Any final words for Samco?

When Prof. Misawa retired, hesaid, “In conducting research,
there are times when ideas alone
Value of undertaking research
are not enough to compete.
that straddles multiple disciplines
You need a weapon to realize
is equally emphasized.
your ideas. That weapon could
be a special analysis, a device
that allows special processing,individuals from an array of companies, isor any number of other things.” I believe
viewed as significant.
that Samco is a manufacturer that gives
researchers the special tools to help them.
▶ How are you spending your holidays?
During my academic years, I often soughtcustomized products and specialized
Although without any hobbies, I always
equipment from manufacturers. As timecook for my family on my days off. Despiteadvanced, the size of research equipment
not being a particularly accomplishedescalated, and the pool of manufacturers
cook, preparing a variety of dishes, such
receptive to customization requests
as fried foods and gratin, for the children’s
seemed to dwindle. Despite this, Samco’s
lunches or meals demanding extensive
ALD equipment has proven responsive,
time and effort, is undertaken mainly due
sincerely engaging with our needs andto personal preferences. In the beginning,addressing complex challenges. Throughmy wife pointed out the lack of an effective
their efforts, we can now deposit films
clean-up process. Lately, considerations
previously beyond our capabilities.
aboutarrangements
andclean-up
It would be commendable if Samcoprocedures during cooking have drawn
continues to incorporate our needs, as wellparallels with conducting experiments.
as those of other users, into their productThis similarity lies in deciding the quantity
development.
of food, determining the procedure, andfinally planning the clean-up. Known
We appreciate your generous
assistant professors and secretaries
allocation of your precious time to us.
opinion that cooking and baking are

Samco, as a manufacturer, hasdemonstrated its commitment to equipping
researchers with these vital tools.

Samco Inc.
For more information please email: info@samco.co.jp
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vol.122 / 2023. JUL.

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