平成２８年度
分野別動向調査報告書（国内外技術動向調査委員会）

平成２９年３月

一般財団法人マイクロマシンセンター

目

次序
第１章

緒言 ································································································· 1

1-1. はじめに ···························································································· 1
1-2. 委員会構成 ························································································· 21-3. 調査方法 ···························································································· 3

第２章

平成 28 年度上期分野別動向調査結果（APCOT2016

2-1.

2-2.

2-3.

発表分類調査、分野別動向調査） ·································· 7

Fundamentals
2-1-1.

Fabrication Technologies (Silicon) ·············································· 122-1-2.

Fabrication Technologies (Non-Silicon) ······································· 162-1-3.

Packaging Technologies ···························································· 202-1-4.

Actuators ··············································································· 24

2-1-5.

Design and Modeling································································ 28

2-1-6.

Material ················································································· 34

2-1-7.

Others (Fundamentals) ···························································· 36

Applied Devices/Systems
2-2-1.

Mechanical Sensor ································································· 38

2-2-2.

Radiation/Material Substance Sensor ······································· 42

2-2-3.

Fluidic ·················································································· 46

2-2-4.

Chemical Sensor ···································································· 502-2-5.

Bio Sensor ············································································· 54

2-2-6.

Medical Systems ···································································· 60

2-2-7.

Optical ················································································· 62

2-2-8.

RF-MEMS ············································································· 66

2-2-9.

Power-MEMS ········································································ 70

2-2-10.

Others (Applied Devices/Systems) ··········································· 74

Others2-3-1.

Others (Overall) ····································································· 76

第３章

平成 28 年度下期分野別動向調査結果（MEMS2017 発表分類調査、分野別動向調査） ······································ 79

3-1.

3-2.

3-3.

Fundamentals
3-1-1.

Fabrication Technologies (Silicon) ·············································· 88

3-1-2.

Fabrication Technologies (Non-Silicon) ······································· 94

3-1-3.

Packaging Technologies ··························································· 100

3-1-4.

Actuators ·············································································· 104

3-1-5.

Design and Modeling······························································· 108

3-1-6.

Material ················································································ 112

3-1-7.

Others (Fundamentals) ·························································· 116

Applied Devices/Systems
3-2-1.

Mechanical Sensor ································································ 120

3-2-2.

Radiation/Material Substance Sensor ······································ 124

3-2-3.

Fluidic ················································································· 128

3-2-4.

Biomacromolecules ································································ 132

3-2-5.

Cells & Subcellular components ·············································· 136

3-2-6.

Tissue/Organ & Medical Applications ······································· 142

3-2-7.

Optical ················································································ 146

3-2-8.

RF-MEMS ············································································ 150

3-2-9.

Power-MEMS ······································································· 154

3-2-10.

Others (Applied Devices/Systems) ·········································· 158

Others3-3-1.

Others (Overall) ···································································· 160