MICRO TABLE

FMT

MICRO TABLEFMT Series

MICRO TABLE

Registration of a Design

OverView････････････････････････････････････････････674

MICRO TABLE

FMT

INDEX★
Explanation, Example of Use, Installation Method ･･･675
Model Code No. ･････････････････････････････････････676
Speciﬁcations, Guide to be used, Spare Parts Code ･･･677
Product Mass, Theoretical Thrust ･･････････････････678
Structure and Principal Components････････････････679
Main Body / Load Instllation Method ････････････････680
Note for Usage ･････････････････････････････････････681
Allowable Load and Allowable Moment ･･････････････682
Theoretical Displacement against Bending Moment･････････683
Outside Dimensions ･･････････････････････････684〜687
Switch Installation ･･････････････････････････････････688
Custom Made ･･･････････････････････････････････････689

673

MICRO TABLEFMT SeriesCompact, Lightweight,
High Accuracy Actuator
Running Parallelism 0.05㎜Linear GuideHigh Accuracy Linear Guide is built-in.
IKO Co., LtdFMTMICRO TABLE

BSP

Two Mounting Surfaces
Threaded holes for mounting
provided in each of the front
and top sides of the ﬂat table
improve the degree of
freedom of mounting.

Linear Guide
Miniature Linear Guide integrated
Small size and high accuracy (runningparallelism: 0.05 mm) achieved.
The trouble of designing the guidemechanism is eliminated.

Rear Side Piping
Piping ports are gathered on
the rear side, saving thespace for mounting in theradial direction.

Lightweight Body
Lightweight product lineincluding the 48 g model(FMT-SD6-10).

674

FMT

MICRO TABLE

Summary of The MICRO TABLE
With the high accuracy, lightweight and compactness given the highest priority,
the actuator integrates an air cylinder, linear guide and table.
The ﬂat shape of the unit has allowed reduction of the height up to the table.

■Application Examples : MICRO TABLE
Drive of Small Sensors

Conductivity Test with Connectors

FMTMICRO TABLE

Transfer of Small Parts■MAIN BODY INSTALLATION（Bolt as shown in the ﬁgure are not supplied with products）

Top Mounting(Thru Hole used)■MOUNTING（Bolt as shown in the ﬁgure are not supplied with products）

Top Mounting

Side Mounting

675

Custom Made
With Helical Insert
689 Page

Model Code Example

FMTS−SD10−10−RA12 LASeries Name●●Bore Size

Magnet●●Cable Length

6φ6

No Code

1m10φ10LA

3m5m for RA1LA Switch

No CodeNone

SWith Magnet●Number of Switches

The magnet will become
necessary when you
install the switch

Mounting●
SD

1122Standard●SwitchNo CodeFMTMICRO TABLE

GT

Symmetric

None

RA1

Straight

RB4Straight

RC4Angle

RB5Straight

RC5Angle

DC24V 2 Wires With Indicator
Reed Switch
Light

DC12〜24V
2 Wires Solid
State Switch
With
DC5〜24V
3 Wires Solid Indicator
LightState Switch

Direction of Cable Outlet
RA, RB･････
Straight Outlet Cable

For details

RC･････
Angle Outlet Cable

Page 1066, 1067

●StrokeBore Size

Standard Stroke (㎜)102030

φ 6

●

●

●

φ10●

●

●

Intermediate Stroke
1mm step intermediate strokes can be set byinstalling spacers in the cylinder for standard strokes,
The total length of the cylinder is the same as that of
the longer stroke cylinder for standard strokes.

676

FMT

MICRO TABLE

SPECIFICATIONSBore Size

φ6㎜

Rod Diameter

φ3㎜

φ10㎜㎜
φ4Maximum Load Mass

0.1kg

0.2kg

Piping DiameterM3×0.5

Guide Mechanism

Miniature Linear Guide

Type of Operation

Double Acting

Fluid

Air

Maximum Operating Pressure

0.7 MPa

Minimum Operating Pressure

0.15MPa

Pressure

1.05MPa

Operating Temperature

5〜60℃

Operating Speed

100〜500㎜/s

Lubrication

Not required

Cushioning

None

THE TYPE OF LINEAR GUIDEFMT6Type

10IKO BSP1025SL

20IKO BSP1035SL

30IKO BSP1045SL

10FMT102030FMTStroke

IKO BSP1540SL
IKO BSP1550SL

OPTIONAL PARTS CODES
Reed Switch

Name

Solid State Switch（2 Wires, with Indicator Light）

Solid State Switch（3 Wires, with Indicator Light）

Straight Outlet Cable Angle Outlet Cable

Straight Outlet Cable Angle Outlet Cable

PARTS CODE

RA1（FMT）

RB4（FMT）

RC4（FMT）

RB5（FMT）

RC5（FMT）

Note

Cable Length:1mCable Length:1mCable Length:1mCable Length:1mCable Length:1m

PARTS CODE

RA1LA（FMT）

RB4LA（FMT）

RC4LA（FMT）

RB5LA（FMT）

RC5LA（FMT）

Note

Cable Length:5m

Cable Length:3mCable Length:3mCable Length:3mCable Length:3mwith ﬁxture

with ﬁxture

with ﬁxture

with ﬁxture

with ﬁxture

RA Switch FixtureRB, RC Switch Fixture

BD（FMT）

BE（FMT）

Switch Fixture, Screw

Switch Fixture, Screw

MICRO TABLE

Model

Content●RB, RC Switch
Conventional RG1,RG2 switch
can be replaced to RB,RC switch.

677

MASS

Unit：gUnit：g

Model

Mass

Switch TypeMass

FMT −SD 6−1048

RA110

FMT −SD 6−2058

RB4

FMT −SD 6−3060

RC4

FMT −SD10−1068

RB5

FMT −SD10−2097

RC5

FMT −SD10−30

108

RA1LA

FMTS−SD 6−1050

RB4LA

FMTS−SD 6−2060

RC4LA

FMTS−SD 6−30

62

RB5LA

FMTS−SD10−1071

RC5LA

FMTS−SD10−20100

FMTS−SD10−30

111153035

NOTE: SD, GT are both the same mass.

THEORETICAL THRUST
Bore Size(㎜)

FMT

φ6φ10

Unit：N

Operating Pressure MPa

WorkingDirection

0.2

0.3

0.4

0.5

0.6

0.7

Push

5.7

8.5

1114

1720

Pull

4.2

6.4

8.5

1113

15

Push

1624

31

39

47

55

Pull

1320263340

46

MICRO TABLE

1MPa=10.2kgf/2
1N=0.102kgf

678

FMT

MICRO TABLESTRUCTURE AND PRINCIPAL COMPONENTS
FMT6These components cannot be disassembled.

FMT
MICRO TABLE

FMT10These components cannot be disassembled.

CautionConventional function will belost if disassembled.

PRINCIPAL COMPONENTS
No.

Name

Material

RemarksNo.

NameMaterial

1

Body

Aluminum AlloyWhite Alumite

9RodStainless SteelWhite Alumite

10Connecting Nut

Stainless Steel

11Circlip

Steel

12O-ring

NBR
NBR

2

TableAluminum Alloy

3Miniature Linear Guide

Stainless, Resin

4

Rod Seal Holder

Aluminum Alloy

Only FMT65Rod CoverAluminum Alloy

13Rod Seal

6

End CoverAluminum AlloyWhite Alumite

14

Piston Seal

NBR

7

Piston Ａ

Stainless Steel

FMT 6

15

MagnetMagnetic Material

Rolled Steel

FMT108Piston Ｂ

Remarks

Nickel Plating

Aluminum Alloy

679

BODY INSTALLATIONLTop Mounting(Thru Hole used)

Thru Hole Length Fastening Torque
L(mm)
N･m

Model

Bolt Size

FMT 6

M32.5

1.1

FMT10

M331.1FMT
MICRO TABLE

MOUNTING ON TABLE
Top Mounting

LFront Mounting

LModel
FMT 6
FMT10

Bolt Size

Screw Depth Fastening Torque
L(mm)
N･m

M3×0.5

4.0

1.1

Note

M3×0.5

4.0

1.1

Note

Screw Depth Fastening Torque
L(mm)
N･m

Model

Bolt Size

FMT 6

M3×0.5

4.0

1.1

FMT10

M3×0.54.0

1.1NoteCaution
A miniature linear guide is employed. Accordingly, when tightening a bolt, hold the table with the hand, etc.
so that the tightening torque is not applied to the table.
Excessive torque or impact applied may cause failure.
Ensure that the tightening torque is 0.23 N·m when holding the table is not possible.
If there is any possibility that the bolts are loosened, take loosening prevention measures such as use of an adhesive.

680

Note

FMT

MICRO TABLE

PRECAUTIONS FOR DESIGN AND USE
CautionMoment due to Cylinder Thrust in Oﬀset Pushing
A miniature linear guide is used and applications inwhich the mounted load or workpiece is pushed with its
center oﬀset are not permitted because the moment
due to the thrust of the cylinder itself exceeds theallowable moment value of the linear guide.
Ensure that the center of the hit area coincides with therod center or use PICO TABLE (PPT) or PICO UNIT (PPU).
CylinderThrustExternal Stopper
When an external stopper is provided, be sure tomount it so that the hitting point is the center of theconnecting nut on the rod axis as shown in the ﬁgurein order to prevent the moment due to cylinder thrustfrom being applied to the miniature linear guide.

LCenter ofHit Area

Moment = Cylinder Thrust x L (Oﬀset)

Accuracy of Assembly Dimensions

External ForceThis product is designed for low load applications. Iflarge external force is applied, use PICO TABLE (PPT)or PICO UNIT (PPU).

Linear Guide Lubrication
Lubricant is enclosed in the linear guide in advancebut the performance will be deteriorated by a long
operating time, operating conditions, environment,etc. Regular lubrication is necessary.
Using without lubrication may accelerate wear of therolling part or cause earlier end of the service life.
The timing of regreasing depends on the operating
conditions and environment. As a rule, regrease atintervals of travel of 100 km or one month.
After wiping the old grease oﬀ, supply lithium
soap-based grease to the linear guide.
Supplying a diﬀerent type of grease may cause
malfunction or failure due to lubrication performancedegradation or chemical change.
Turbine oil can be applied or drop-fed for use.
Do not use spindle oil or machine oil because they
adversely aﬀect the packing.

Connecting Nut

Mounting Surface Accuracy
Ensure that the mating mounting surface of amachine, equipment, jig, etc. is a ﬂat surface
machined to high precision without unevenness or
projections and mounting is correct in order toachieve stable, high-accuracy linear motion.
Low mounting surface accuracy or incorrect mounting
may cause looseness, increase the rolling resistanceor adversely aﬀect the service life.

Rolling Feel in Linear Guide
When the table is moved by hand, rolling of balls
inside the linear guide may cause slight feel ofoperation discontinuity or diﬀerence in the rolling
resistance between products. This is due to preloadof the linear guide and does not aﬀect theperformance.

FMTWhen high accuracy of assembly dimensions of theproduct is required, use the following products.
PICO TABLE（ＰＰＴ）
39 page
PICO UNIT（ＰＰＵ）
313 page

External Stopper

MICRO TABLE

Rod Center

Moment681

ALLOWABLE LOAD AND ALLOWABLE MOMENTCation■Moment Direction and the Position of Guide Center LineThe moment directions are classiﬁed into three types in accordance with the mounting conditionof a load to the actuator.

Pitching

Yawning

Z

Guide Center Line

Rolling

YMrRolling

MyYawning

XMp
PitchingW

F＝9.8×W

FMT

GuideCenterLine

MICRO TABLE

FMT6FMT10Unit：ｍGuide Center Line Positions
X'X"

100.0265

0.0315200.0335

0.0435300.0405

0.0555100.0335

0.0385200.0365

0.046530

0.04450.0595Z

GuideCenter Line

Ly

Lp

Stroke（㎜）F＝9.8×W

F＝9.8×W

Guide Center Positions
ModelWW

YZ

0.00650.00630.00900.0075Lr

W(kg):mass of a loaded work
F(N):gravitation acting on a loaded work
Lp,Ly,Lr(m):distance between the center line ofthe guide and that of a loaded work

X' :at pull end
X" :at push end■allowable Mass and Allowable Moment in case of a Loaded WorkConﬁrm that the following two values are respectively within the allowable range.

①Allowable Load Mass

Unit：kg

Model

FMT6

FMT10

Allowable Load Mass

0.1

0.2

②Allowable Loaded Work Moment

The moment in each direction generated by the gravity acting on a loaded work is calculated by theformulas below. These calculated values shall not exceed the allowable loaded work moment.
(Load moment)=(Gravity acting on a load: F) x (Distancebetween guide center line and center ofgravity of a loaded work:L)=9.8 x (Load mass:W) x (Distance
between guide center line and center ofgravity of a:loaded work:L)(Gravity acting on a load:F) =9.8 x (Load mass:W)
Pitching :Mp(N·m)=9.8 x W(kg) x Lp(m)Yawing :My(N·m) =9.8 x W(kg) x Ly(m)Rolling :Mr(N·m) =9.8XW(kg)XLr(m)Allowable Loaded Work Moment
Model

FMT6

FMT10

Stroke（㎜）Unit：N･m

Allowable Loaded Work Moment
MpMyMr100.046

0.040

0.049

200.0610.053

0.062

30

0.076

0.067

0.074

100.079

0.069

0.169

200.079

0.069

0.169

300.103

0.089

0.213

1N･m＝0.102kgf･m

682

FMT

MICRO TABLE

DEFLECTION AT THE TABLE END BY BENDING MOMENTFMT620

FMT6−30

15
FMT6−20

10

FMT6−10500.05

Deﬂection（×10–3㎜）

Deﬂection（×10–3㎜）■Pitching（Mp）
FMT1020

FMT10−2015

FMT10−30

10
500.1

FMT10−100.05

Bending Moment （N・m）

0.1

Bending Moment （N・m）

FMT1015105

FMT6−10

FMT6−30

FMT6−2000.1

0.05

2015FMT10−1010FMT10−20

FMT10−30

500.05

Bending Moment （N・m）

0.1

Bending Moment （N・m）

MICRO TABLE

Deﬂection（×10–3㎜）

FMT620FMT

Deﬂection（×10–3㎜）■Yawning（My）

Inclined Angle（deg.）■Rolling（Mr）
FMT6、10My

1.0

FMT10
FMT6

Mp

0.5

00.1

0.2

Bending Moment （N・m）

Mr683

DIMENSIONS(mm)FMT6 BASIC

FMT（S）−SD6−（Stroke）
Basic
Bore Size＊
2−Ｍ3×0.5depth4.5

TL
TA

TB

3.5

＊
2−Ｍ3×0.5depth4.5

Ｍ3（Forward Port）

24

13

122.5

215

4.5

14.5
5

7.5

414.5
6.5

714.5

150.5

4.552.5

FMT
MICRO TABLE

FS

252−φ3.3ZZ

2−φ6.530
33

Ｍ3（Backward Port）＊Ensure that the protrusion of the bolts ﬁxing the loaded work is within 4mm.

684

ModelFS

TA

TB

TL

ZZ

FMT（S）−SD6−1039

46

15154151

FMT（S）−SD6−2049

56

19205561

FMT（S）−SD6−30

5966

23256971

FMT

MICRO TABLEDIMENSIONS(mm)FMT6 SYMMETRIC

FMT（S）−GT6−（Stroke）
Symmetric
Bore Size＊2−Ｍ3×0.5depth4.5

3.5

F

TB
TL

Ｍ3（Forward Port）
14.5

240.5MICRO TABLE

2.5S5255

4.5
4.5

2.5

714214.5

7.5

5136.5

15

14.5

12FMTTA＊
2−Ｍ3×0.5depth4.5

2−φ3.3ZZ

2−φ6.53033

Ｍ3（Backward Port）＊Ensure that the protrusion of the bolts ﬁxing the loaded work is within 4mm.

Model

F

STA

TB

TL

ZZ

FMT（S）−GT6−10394615154151

FMT（S）−GT6−204956

19205561

FMT（S）−GT6−30

5966

23256971685

DIMENSIONS(mm)FMT10 BASIC

FMT（S）−SD10−（Stroke）
BasicBore Size

＊2−Ｍ3×0.5depth4.5

TLTATB

3.5＊2−Ｍ3×0.5depth4.5

Ｍ3（Forward Port）
15.5

109594.5

4264.53252−φ3.3
S

2−φ6.5

ZZ

37

Ｍ3（Backward Port）

40＊Ensure that the protrusion of the bolts ﬁxing the loaded work is within 4mm.

686

19417

17.5

0.5

10
14.5

18313

FMT
MICRO TABLE

F

ModelF

S

TA

TB

TL

ZZ

FMT（S）−SD10−104855

16205560

FMT（S）−SD10−205865

22206170

FMT（S）−SD10−306875

28257780

FMT

MICRO TABLEDIMENSIONS(mm)FMT10 SYMMETRIC

FMT（S）−GT10−（Stroke）
Symmetric
Bore Size

3.5FFMTTA

TB
TL＊
2−Ｍ3×0.5depth4.5

Ｍ3（Forward Port）
1944.5532514.54.5

43102615.5

9100.51817917.5

31

MICRO TABLE＊
2−Ｍ3×0.5depth4.5

S

2−φ3.3ZZ

2−φ6.537
Ｍ3（Backward Port）

40＊Ensure that the protrusion of the bolts ﬁxing the loaded work is within 4mm.

Model

FS

TA

TB

TL

ZZ

FMT（S）−GT10−104855

16205560

FMT（S）−GT10−20586522206170

FMT（S）−GT10−30687528257780687SWITCH SETTING POSITION
Explanation of hysteresis and on hold distance.
■Setting Positionsee Switch Catalogue

24A

22

BA

RA1 Switch
Model

BRB, RC Switch

Switch Setting Position On Hold Distance Hysteresis
ｃ
A
B

Model

Switch Setting Position On Hold Distance Hysteresis
ｃ
A
B

FMT 6

7.3

28.7

10

1

FMT 6

6.6

29.4

3.5

0.5

FMT10

10.5

34.5

10

1

FMT10

9.8

35.2

40.5

Explanation of hysteresis and on hold distance.

Loosen the ﬁxing screw to move the switch alongthe axis. Adjust the switch to the appropriate
position while checking the switch operation
using the indicator. Then tighten the screw with0.3N・m of torque.

MICRO TABLE

FMT■Switch Installation

688

Screw
Plate
Switchsee Switch Catalogue

FMT

MICRO TABLE

Custom Made
Contact us for how to order, time to delivery and detailed speciﬁcation.
Threaded Hole with Helical Insert・・・・・Model with the threaded holes for mounting a loadin the table top side provided with helical inserts.
Note: It is not possible to add helical inserts to an already purchased product.

Helical Insert Material: Stainless Steel
Size of Threaded Hole with Helical Insert: Ｍ3 Screw depth3 or Ｍ4 Screw depth4

Threaded Hole with Helical Insert

FMTMICRO TABLE

The screw can not be a helical insert.

689

■M E M O ■690

■M E M O ■691

■M E M O ■692