平成12年度
分野別動向調査報告書（マイクロマシン技術国内外研究開発動向調査分科会）

平成１２年３月

財団法人

マイクロマシンセンター

序マイクロマシン技術は、工業技術や医療技術をはじめとする広範な分野において革新的な基盤技術になるとして注目され、国内外の機械工学、電子工学、医用工学等の多様な分野でその研究開発が急速に拡大しております。
マイクロマシンという言葉が生まれ、マイクロマシン技術の本格的な研究開発がスタートしておよそ10年が経過しました。現在、多くの研究成果が国際会議、シンポジウム、学会、研究論文および新聞・雑誌などを通じて報告されるようになりました。しかし、マイクロマシン技術の応用可能性の大きさから考えると、それらはまだ一部分であり、今後もよりはば広い研究開発が必要であると考えられます。今後の研究開発を円滑かつ効率的に推進させるためには、現状の研究開発状況を調査・分析し、マイクロマシン技術関係者にフィードバックすることがきわめて重要であります。
このような状況と認識に立って、当マイクロマシンセンターではマイクロマシン技術国内外研究開発動向調査事業を行ってまいりました。
本報告書は、この調査研究事業の成果をとりまとめたものです。各方面において広くご利用頂ければ幸いです。
平成 13 年 3 月
財団法人マイクロマシンセンター
専務理事

平野隆之

目次序
第１章

緒言 ···································································································· 1

1-1. はじめに···························································································· 1
1-2. 委員会構成························································································· 21-3. 調査方法···························································································· 3
第２章
2-1.

2-2.

第３章
3-1.

3-2.

分野別動向 Review ················································································ 5
Fundamentals2-1-1.

Fabrication Technologies (Silicon) ················································ 82-1-2.

Fabrication Technologies (Non-Silicon) ······································· 10

2-1-3.

Packaging Technologies ···························································· 12

2-1-4.

Actuators (Electrostatic, Piezoelectric,..etc.) ································ 14

2-1-5.

Actuators (Electromagnetic, Magnetic) ······································· 16

2-1-6.

Design and Modeling································································ 18

2-1-7.

Material ················································································· 20

Applied Devices/Systems
2-2-1.

Physical (Sensors)···································································· 222-2-2.

Fluidic ··················································································· 24

3-2-3.

Medical ·················································································· 28

2-2-4.

Biological ··············································································· 32

2-2-5.

Optical ··················································································· 342-2-6.

Chemical ················································································ 38

2-2-7.

Robotic System and Control ······················································ 40

2-2-8.

Others (SPM, Switches, relays,...etc.) ········································· 42

平成 12 年度分野別動向調査結果 ···························································· 47
Fundamentals
3-1-1.

Fabrication Technologies (Silicon) ·············································· 52

3-1-2.

Fabrication Technologies (Non-Silicon) ······································· 54

3-1-3.

Packaging Technologies ···························································· 58

3-1-4.

Actuators (Electrostatic, Piezoelectric,..etc.) ································ 60

3-1-5.

Actuators (Electromagnetic, Magnetic) ······································· 62

3-1-6.

Design and Modeling································································ 64

3-1-7.

Material ················································································· 66

Applied Devices/Systems
3-2-1.

Physical (Sensors)···································································· 68

3-2-2.

Fluidic ··················································································· 70

3-2-3.

Biological ··············································································· 74

3-2-4.

Optical ··················································································· 76

3-2-5.

Chemical ················································································ 78

3-2-6.

Robotic System and Control ······················································ 82

3-2-7.

Others (SPM, Switches, relays,...etc.) ········································· 84