ISPlasma2022/IC-PLANTS2022 March 6 - 10, 2022 Nagoya, Japan

3/6（SUN）
9:00-11:00
Hall of fameAward ceremony

9:20-9:50
Hall of fame
M. J. Kushner(EST 19:20-19:40)
9:50-10:20
Hall of fameDavid B Graves(EST 19:40-20:00)
10:20-10:50
Hall of fameKunihide Tachibana

Closing remarks
11:00-11:20 Break
11:20-12:20<06aA04T>
Tutorial
Plasma Science and Technologies
Chair: Fumiyoshi Tochikubo (Tokyo Metropolitan University)
Toshiaki Makabe
Keio University"Introduction to Modeling of Low-Temperature Rf-Plasmas Interacting with Surface: -Exploration for Hidden andIndiscernible Processes-"

12:20-13:20 Break
13:20-14:20<06pA05T>
Tutorial
Nanomaterials
Chair: Seiichi Miyazaki (Nagoya University)
Noritaka Usami
Nagoya University"Impact of Plasma Treatment on Heterostructures for Silicon-Based Solar Cells"

14:20-14:40 Break
14:40-15:40<06pA06T>
Tutorial
Nitride Semiconductors
Chair: Yoshihiro Kangawa (Kyushu University)
Kazuyuki Tadatomo
Yamaguchi University"Development of Patterned Sapphire Substrate and Application to Crystal Growth of Nonpolar and Semipolar GaN"

10

ISPlasma2022/IC-PLANTS2022 March 6 - 10, 2022 Nagoya, Japan

15:40-16:00 Break
16:00-17:00<06pA07T>
Tutorial
Bio Applications
Chair: Shinya Kumagai (Meijo University)
Koichi Takaki
Iwate University"Design of Pulsed Power Generator and its Applications for Agriculture and Food Processing"

17:00-18:00 Break
18:00-19:00
Plasma prize
Chair: Noriyasu Ohno (Nagoya University)
Yasushi Nanishi (Ritsumeikan University)

11

ISPlasma2022/IC-PLANTS2022 March 6 - 10, 2022 Nagoya, Japan

3/7（MON）
9:10-9:30
Opening & Plasma prize ceremony
Chair: Noriyasu Ohno (Nagoya University)

9:30-10:30<07aA01P>
Plenary Lecture
Chair: Noriyasu Ohno (Nagoya University)
Hiroshi Amano
Nagoya University"Frontier Electronics as “Painkillers” of Our Society and Environment"

10:30-10:50 Break
10:50-11:30<07aA02K>
Keynote Lecture
Chair: Osamu Nakatsuka (Nagoya University)
Hitoshi Tabata
The University of Tokyo"Nano Structural Controlled Functional Oxide Thin Films Learning from Bio-Systems"

11:30-12:00 Break
Plasma Science andNitride Semiconductors 1
Chair: Tetsuya Takeuchi
Technologies 1
Chair: Tsuyohito Ito(Meijo University)(The University of Tokyo) Room C
Room B

Nanomaterials 1
Chair: Hiroyuki Kousaka(Gifu University)
Room D

12:00-12:30<07pB03I>
Invited Lecture
Kentaro Tomita
Hokkaido University"Observation of TwoDimensional Plasma Flows
toward Higher Temperature
Regions in Laser Produced
Tin Plasmas for Extreme
Ultraviolet (EUV) Light
Sources"

12:00-12:30
12:00-12:20 1133
<07pD03I><07pE03O>
Invited Lecture
Hiroki Kondo
Kazuyoshi Ueno
Nagoya University
Shibaura Institute of"Three-Dimensional
Technology
Morphological Analysis of"Advances in Graphene
Carbon Nanowalls"
1
Processes for Metallization
Hiroki Kondo, 1Atsushi Ozaki,
and High Frequency Devices" 1Takayoshi Tsutsumi, 1Kenji
Ishikawa, 1Makoto Sekine,
1
Masaru Hori, 2Uros Cvelbar
and 3Mineo Hiramatsu

12:00-12:30<07pC03I>
Invited Lecture
Jared Kearns
Sony"Mode Control of Long-Cavity
Blue and Green VCSELs"

Plasma Science & Technologies 2
Chair: Kazunori Koga
(Kyushu University)
Room E

1

Nagoya University
Jozef Stefan Institute3
Meijo University
2

12ISPlasma2022/IC-PLANTS2022 March 6 - 10, 2022 Nagoya, Japan

12:20-12:40 1016
<07pE04O>
Yen-Sheng Lin
I-Shou University"Inserting Intermittent Time in
the Ultra-Thin GZO Layer
Process to Improve its Opticaland Electrical Properties"
Chia-Hsien Teng and YenSheng Lin
12:30-13:00<07pB04I>
Invited Lecture
Ryo Yasuhara
National Institute for Fusion
Science"The Fast Thomson
Scattering Measurement for
High-Temperature Helical
Plasma in LHD"

12:30-13:00<07pC04I>
Invited LectureJung Han
Yale University"Porous GaN and its
Applications"

12:30-13:00<07pD04I>
Invited Lecture
Junho Choi
The University of Tokyo"Development of Amorphous
Carbon Film Based Highly
Durable Triboelectric
Nanogenerator"

I-Shou University

12:40-13:00 1068
<07pE05O>
Yoshikazu Terai
Kyushu Institute of Technology"Growth of AlN Thin Films by
Pressure Gradient Sputtering
Method"1Haraguchi Kengo, 1Ichinose
Ryo, 2Ohta Hiroki,
2
Yonezawa Ken and 1Terai
Yoshikazu
1

Kyushu Institute of Technology
Kenix Corporation2

13:00-13:20 1084
<07pB05O>
Yasuaki Haba
Nihon University"Experimental Study on
Focusing of a Negative Ion
Beam Aimed at Fusion
Plasma Heating"1
Yasuaki Haba, 1Mitsutoshi
Aramaki, 2,3Katsuyoshi
Tsumori, 2,3Haruhisa Nakano,2,3
Masaki Osakabe, 2Katsunori
Ikeda, 4Taiga Hamajima and
2,4
Kenichi Nagaoka
1

Nihon University
National Institute for Fusion
Science
3
SOKENDAI (The Graduate
University for Advanced Studies)4
Nagoya University
2

13:00-13:30<07pC05I>
Invited Lecture
Ryuji Katayama
Osaka University"Deep UV Emission from
Nitride-Based Wavelength
Convertor"

13:00-13:20 1120
<07pD05O>
Shintaro Iba
Nagoya University"Effect of RF Stage-Bias onMorphology of Carbon
Nanowalls Grown by a
Radical-Injection PlasmaEnhanced Chemical Vapor
Deposition"
1
Shintaro Iba, 1Hiroki Kondo,
1
Kenji Ishikawa, 1Takayoshi
Tsutsumi, 1Makoto Sekine,
2
Mineo Hiramatsu and1
Masaru Hori
1
2

13

Nagoya University
Meijo University

13:00-13:20 1180
<07pE06O>
Dennis Christy
Nagoya University"Spectroscopy of H2/CH4/N2
Plasma for Carbon Nanowalls
Growth"Dennis Christy, Ngo Van
Nong, Osamu Oda, Masaru
Hori and Nikolay Britun
Nagoya University

ISPlasma2022/IC-PLANTS2022 March 6 - 10, 2022 Nagoya, Japan

13:20-13:40 1128
<07pD06O>
Swapnil Ghodke
Nagoya University"Nanomechanical Propertiesof Maze-Like Carbon
Nanowalls Structure by
Nanoindentation Technique"
Swapnil Ghodke, Motoyuki
Murashima, Dennis Christy,
Ngo Van Nong, Osamu Oda,
Noritsugu Umehara, Kenji
Ishikawa and Masaru Hori
Nagoya University

13:30-15:00 BreakKeynote Lecture
Chair: Yasunori Tanaka (Kanazawa University)
Room A
15:00-15:40<07pA07K>
Keynote Lecture
Anthony B. Murphy
Materials Science and Engineering, CSIRO"Thermal Plasmas for Metal 3D Printing"

15:40-16:00 Break
Plasma Science andTechnologies 3
Chair: Hiroki Kondo(Nagoya University)
Room B

Plasma Science andTechnologies 4
Chair: Ryo Yasuhara( National Institute for
Fusion Science)
Room C

Nitride Semiconductors 2
Chair: Makoto Miyoshi( Nagoya Institute ofTechnology)
Room D

16:00-16:20 1154
<07pB08O>
Hitoshi Muneoka
The University of Tokyo"Generation of Dielectric
Barrier Discharges Using
Carbon Nanotube Sheets as
Electrodes in High-Density
Fluids Including Supercritical
Fluids and Liquids*"
1
Hitoshi Muneoka, 2Riichiro
Ohta, 1,3Sven Stauss and1
Kazuo Terashima

16:00-16:20 1034
<07pC08O>
Ikumi Hamaguchi
Nagoya University"Plasma Density Increase of
Electron Cyclotron
Resonance Plasma by High
Voltage Pulse Power
Application"
1
Ikumi Hamaguchi,
1
Hansin Bae, 2Kensuke Sasai,
1,2Haruka Suzuki and
1,2,3
Hirotaka Toyoda

16:00-16:30<07pD08I>
Invited Lecture
Subramaniam Arulkumaran
Nanyang Technological
University"High Breakdown Vertical
GaN-on-GaN Schottky
Diodes for α-Particle
Detection"

1

The University of Tokyo
Toyota Central R&D Labs., Inc.
3
Tohoku University
2

1

Nagoya University, Department
of Electronics
2
Nagoya University, Center for
Low-temperature Plasma Sciences
3
National Institute for Fusion
Science

14

Room EISPlasma2022/IC-PLANTS2022 March 6 - 10, 2022 Nagoya, Japan

16:20-16:40 1134
16:20-16:40 1035
<07pB09O><07pC09O>
Yuki Iwata
Ma. Shanlene D.C. Dela
Nagoya University
Vega"O Radical Measurement of
Nagoya University"In-Liquid Plasma Coating of Ar/O2 Microwave Plasma in
Atmospheric Pressure"
Graphite Films on Metal
Surface Immersed in Ethanol" 1Yuki Iwata, 1Tomohiro
1
Ogasawara, 1,2Haruka Suzuki
Ma. Shanlene Dela Vega,2
and 1,2,3Hirotaka Toyoda
Hiroki Kondo, 2Takayoshi
1
2
Department of Electronics,
Tsutsumi, Thi-Thuy-Nga
Nagoya University
Nguyen, 2Kenji Ishikawa,
16:30-17:00
2
2
3
Makoto Sekine, Magdaleno Center for Low-temperature2
Plasma Sciences, Nagoya University <07pC09I>
Jr. Vasquez and Masaru
3
Invited Lecture
National Institute for Fusion
Hori
ScienceKazuki Ohnishi
1
Nagoya University
Nagoya University
2
Center for Low-temperature"Halide Vapor Phase Epitaxy
Plasma Sciences, Nagoya
of P-Type GaN for Vertical
University
3
GaN Power Devices"
University of the PhilippinesDiliman

16:40-17:00 1150
<07pB10O>
Fumiyoshi Tochikubo
Tokyo Metropolitan University"Behavior of Droplets in Low
Temperature DBD in
Atmospheric-Pressure
Helium"Keisuke Nakagawa, Yusuke
Nakagawa and Fumiyoshi
Tochikubo
Tokyo Metropolitan University

16:40-17:00 1132
<07pC10O>
Kam-Hong Chau
Feng Chia University"Observation of Bi-Maxwellian
Distribution in HIPIMS
Plasma Using a Langmuir
Probe"
1,2
Kam-Hong Chau,
1,3
Yoshinobu Kawai, 2Chi-Wai
Kan, 1Jia-Lin Syu, 1Yen-Chun
Liu, 1Ying-Hung Chen,
1
Chen-Jui Liang and 1JuLiang He
1Feng Chia University
The Hong Kong Polytechnic University
3
Kyushu University
2

17:00-17:20 1168
<07pB11O>
Naohiro Shimizu
Nagoya University"Rebound Tailing Pulse
Method Applied to Water
Electrolysis"
1
Naohiro Shimizu, 1Ranjit
Borude, 1Reiko Tanaka,
1
Kenji Ishikawa, 1Osamu
Oda, 2Hiroki Hosoe, 2SatoshiIno, 2Yousuke Inoue and1
Masaru Hori
1

Nagoya University
Honda Research and Development
Company Ltd.
2

17:00-17:20 1069
<07pC11O>
Bibhuti Bhusan Sahu
Indian Institute of Technology(IIT) Delhi"Simple External Filter andTuning for Operation in DualRadio Frequency Plasmas
Using CompensatedLangmuir Probe"
1,2
B. B. Sahu, 1M. Sekine,
1
T. Tsutsumi, 1K. Ishikawa,1
H. Shogo, 1H. Tanaka,
1
N. Ohno and 1M. Hori

17:00-17:20 1183
<07pD10O>
Soichiro Kawata
Toyota Technological Institute"High Breakdown Voltage of
p-GaN/AlGaN/GaN Diodewith Controlled Mg Acceptor
Charges"
1
Soichiro Kawata, 1Satoshi
Fukutani, 1,2Yuwei Zhang
and 1,2Naotaka Iwata
1

Toyota Technological InstituteResearch Center for Smart
Energy Technology
2

1

Nagoya University
Department of Energy Scienceand Engineering2

17:20-17:40 Break15

ISPlasma2022/IC-PLANTS2022 March 6 - 10, 2022 Nagoya, Japan

Plasma Science andTechnologies 5
Chair: Masaharu Shiratani(Kyushu University)
Room B

Room CRoom D

17:40-18:10<07pB12I>
Invited Lecture
Min-Suk Cha
King Abdullah University of
Science and Technology(KAUST)"Low Temperature PlasmaChemical Kinetic Study for
Hydrogen"

18:10-18:40<07pB13I>
Invited Lecture
Achim von Keudell
Ruhr University Bochum"Nanosecond Plasmas in
Liquids – Dynamic Plasmas
at GPa Pressures"

18:40-19:00 Break

19:00-20:00 Short Presentation (Poster) 1

16

Room EISPlasma2022/IC-PLANTS2022 March 6 - 10, 2022 Nagoya, Japan

3/8（TUE）
Plasma Science andTechnologies 6
Chair: Makoto Sekine(Nagoya University)
Room B

Nitride Semiconductors 3
Chair: Manato Deki
(Nagoya University)
Room C

9:00-9:30<08aB01I>
Invited Lecture
Tomohiro Nozaki
Tokyo Institute of Technology"Diagnostics of PlasmaCatalyst Interfacial Reaction
by in Situ IR Spectroscopy"

9:30-10:00<08aB02I>
Invited Lecture
Koichi Sasaki
Hokkaido University"Contribution of Vibrational
Excited States of Molecular
Nitrogen to Synthesis ofAmmonia in Low-Pressure
N2/H2 Plasmas with Low
Electron Temperatures"

Nanomaterials 2
Chair: Katsunori Makihara(Nagoya University)
Room D
9:00-9:30<08aD01I>
Invited Lecture
Hiroyuki Miyazoe
IBM Corporation"Future of Computing andPlasma Processings"

9:30-10:00<08aC02I>
Invited Lecture
Masachika Toguchi
Hokkaido University"Fabrication of RecessedGate AlGaN/GaN HEMTs by
Low-Damge Contactless
Photo-Electrochemical
Etching"

Bio Applications 1
Chair: Hirofumi Kurita(Toyohashi University of Technology)
Hiroshi Hashizume(Nagoya University)
Room E
9:00-9:30<08aE01I>
Invited Lecture
Masafumi Ito
Meijo University"Biological Applications Using
Neutral Radicals Generated
from Atmospheric-Pressure
Plasma"9:30-10:00
9:30-10:00<08aD02I><08aE02I>
Invited Lecture
Invited Lecture
Daisuke Takeuchi
Katsuyuki Takahashi
National Institute of Advanced Iwate University
Industrial Science and"Agricultural Applications ofTechnology (AIST)High Voltage Pulses and"Diamond Pin Diode-Type
Atmospheric Discharges"
Electron Emitters for Power
Swtiches"

17

ISPlasma2022/IC-PLANTS2022 March 6 - 10, 2022 Nagoya, Japan

10:00-10:30
10:00-10:20 1058
<08aB03I><08aC03O>
Yuichi Wada
Invited Lecture
Ritsumeikan University
Keisuke Takashima"Microstructural
Tohoku University
Characterization of Nitride"Generation of Vibrationally
Semiconductor Films Grown
Excited Nitrogen in a NonSelf-Sustaining DC Discharge on ScAlMgO4 Substrate by
RF-MBE"
toward Plasma Nitrogen1
Fixation"
Yuichi Wada, 1Yuya Kuroda,
1
Seiya Kayamoto, 1Naoki Goto,
1,2
Takashi Fuji, 1Shinichiro
Mouri, 2Yuji Shiraishi,
2
Tsuguo Fukuda and1
Tsutomu Araki

10:00-10:20 1090
<08aD03O>
Shigeru Yamada
Gifu University"Evaluation of Optical
Absorption in Si/SiO2
Superlattice by Fourier
Transform Photocurrent
Spectroscopy"
Shigeru Yamada, Yuki Nishi,
Takumi Nakagawa, Yuto
Ebata, Nur Syazwana Abd
Rahman and Takashi Itoh

10:00-10:30<08aE03I>
Invited Lecture
Attri Pankaj
Kyushu University"Green Route for the
Production of Nitrogen
Fertilizer: A Step towards
Decentralization of Fertilizer
Production"

Gifu University

1

Ritsumeikan University
Fukuda Crystal Laboratory Co.,Ltd..
2

10:20-10:40 1061
<08aC04O>
Yasuyuki Kobayashi
Hirosaki University"Plasma-Assisted MBE
Grown h-BN Thin Films on
Glass Substrates"
1
Naoki Hatakeyama, 1Takashi
Azuhata, 1Hideki Nakazawa,1
Hiroshi Okamoto,2
Masanobu Hiroki, 2Kazuhide
Kumakura and 1Yasuyuki
Kobayashi
1
2

Hirosaki University
NTT Basic Research Laboratories

10:30-11:00 Break
Plasma Science andTechnologies 7
Chair: Koichi Sasaki(Hokkaido University)
Room B

Nitride Semiconductors 4
Chair: Naotaka Iwata( Toyota Technological
Institute)
Room C

Nanomaterials 3
Bio Applications 2
Chair: Makoto Kambara
Chair: Hajime Sakakita(AIST)(The University of Tokyo)
Shinji Yoshimura
Room D( National Institute for
Fusion Science)
Room E

11:00-11:30
11:00-11:30
11:00-11:30<08aB04I><08aC05I><08aD04I>
Invited Lecture
Invited Lecture
Invited Lecture
Tetsuya Haruyama
Biplab Sarkar
Tomoyuki Murakami
Kyushu Institute of Technology Indian Institute of Technology, Seikei University"Production of Compounds
Roorkee, Uttarakhand"Graph-Theoretical Analysis
and Radical Species at the"Small Signal Model for High of Chemical Network
Interface between PlasmaFrequency Analysis of AlGaN/ Activated by Lowand Water: Plasma / Liquid
GaN MOS-HEMTs "Temperature Plasma"(P/L) Interfacial Reaction"

18

11:00-11:30<08aE04I>
Invited Lecture
Yun-Chien Cheng
National Yang Ming Chiao
Tung University"Atmospheric-pressure
Plasma Effects on Cancer
Cells and RONS Generation
for Medical Applications"

ISPlasma2022/IC-PLANTS2022 March 6 - 10, 2022 Nagoya, Japan

11:30-12:00<08aB05I>
Invited Lecture
Moon Soo Bak
Sungkyunkwan University"Characterization andApplication of AtmosphericPressure Microwave Plasma
for CO2 Conversion"

11:30-11:50 1051
11:30-12:00<08aC06O><08aD05I>
Masahiro Uchida
Invited Lecture
University of Fukui
Yasunori Tanaka"Two-Dimensional
Kanazawa University
Characterization on Schottky "Numerical Simulation on
Contacts on AlGaN/GaN
Decaying Arc Plasmas in
HEMTs by Scanning Internal Polyatomic Molecular Gas
Photoemission Microscopy"
Flow for Fundamental Study
1,2
on Interrupting Electric
Masahiro Uchida, 1Yuto
Kawasumi, 1Hiroki Imabayashi Current"
and 1Kenji Shiojima

11:30-12:00<08aE05I>
Invited Lecture
Kiyoshi Hirahara
Chiba University"The Pathophysiology ofChronic Airway Inflammation"

1

University of Fukui
NTT Advanced Technology Corp.

2

12:00-12:30 1037
<08pB06O>
Nikolay Britun
Nagoya University"Time-Resolved Dynamics ofa Ns- Atmospheric Jet
Discharge"
1
Nikolay Britun, 1Peterraj
Dennis Christy, 2Vladislav
Gamaleev and 1Masaru Hori

11:50-12:10 1179
<08aC07O>
Yuto Yasui
University of Fukui"Characterization ofPeripheries of n-GaN
Schottky Contacts Using
Scanning Internal
Photoemission Microscopy"
1
Yuto Yasui, 2Fumimasa
Horikiri, 2Yosinobu Narita,
2
Noboru Fukuhara,
12:00-12:30
3
Tomoyoshi Mishima, 1Hiroki <08pD06I>
1
Imabayashi and Kenji
Invited Lecture
Shiojima
Manabu Tanaka
1
University of Fukui
Kyushu University
2
Sciocs Company Limited"Development of Diode3
Hosei University
Rectified AC Arc System for
High-Throughput Process"1

Nagoya University		
Air Liquide Laboratories

2

12:10-12:30 1189
<08pC08O>
Ryuji Kamiya
Toyota Technological Institute"Conduction Change of Mg
and Si Co-Doped GaN Layer
by ArF Laser Irradiation"
1
Ryuji Kamiya, 1Yukari
Yonetani, 1Yuwei Zhang,
1
Itaru Kamiya, 2Noriko
Kurose, 3Yoshinobu Aoyagi
and 1Naotaka Iwata
1

Toyota Technological InstituteNational Center of Neurology andPsychiatry
3
Ritsumeikan University
2

12:30-13:30 Break19

12:00-12:30<08pE06I>
Invited Lecture
Akira Yamashita
National Institutes of Natural
Sciences"Molecular Genetic Approachfor Understanding Cellular
Responses against Plasma
Irradiation"

ISPlasma2022/IC-PLANTS2022 March 6 - 10, 2022 Nagoya, Japan

13:30-14:30 Short Presentation (Poster) 2

14:30-16:00 Break
Plasma Science andTechnologies 8
Chair: Fumiyoshi Tochikubo( Tokyo Metropolitan
University)
Room B

16:00-16:20 1118
<08pB07O>
Takeru Koike
The University of Tokyo"Highly Sensitive Electric
Field Measurement via
Electric-Field-Induced
Coherent Anti-Stokes Raman
Scattering in Visible Region"
Takeru Koike, Hitoshi
Muneoka, Kazuo Terashima
and Tsuyohito Ito

Nitride Semiconductors 5
Chair: Koh Matsumoto(Nagoya University)
Room C

Nanomaterials 4
Chair: Mineo Hiramatsu(Meijo University)
Room D

16:00-16:30<08pC09I>
Invited Lecture
Hiroshi Fujioka
The University of Tokyo"Characteristics andApplications of GaN Films
Prepared by Low
Temperature Plasma
Process"

16:00-16:30<08pD07I>
Invited Lecture
Feng Liang
Kunming University of
Science and Technology"Preparation of
Nanomaterials as
Electrocatalysts by DC Arc
Discharge"

16:30-17:00<08pC10I>
Invited Lecture
Henryk Turski
Institute of High Pressure
Physics of the Polish
Academy of Science"Buried Tunnel Junction for
Inverted Current Flow in IIINitride Structures"

16:30-16:50 1048
<08pD08O>
Hiroaki Nakamura
National Institute for Fusion
Science"MD Simulation on
Fabrication of ChiralNanoneedle by Optical
Vortex"
1,2
Hiroaki Nakamura and2
Shu Habu

The University of Tokyo

16:20-16:50<08pB08I>
Invited Lecture
Sander Nijdam
Eindhoven University ofTechnology"Streamer Inception andImaging in Various
Atmospheres"

1

National Institute for Fusion
Science2
Nagoya University

20

Room EISPlasma2022/IC-PLANTS2022 March 6 - 10, 2022 Nagoya, Japan

Nitride Semiconductors 5
Chair: Daichi Imai
(Meijo University)
Room C

16:50-17:10 1117
<08pD09O>
Wenbo Wang
The University of Tokyo"Industrialized Preparation of
SiGe Nanocomposite
Powders by Plasma Spray
Physical Vapor Deposition for
Lithium-Ion Batteries"
1
Wenbo Wang, 1Ryoshi Ohta,
2
Masashi Dougakiuchi and1
Makoto Kambara
Bio Applications 3
1
The University of Tokyo
Chair: Hiromasa Tanaka
2
Shimane Institute for Industrial(Nagoya University)
Technology
Hajime Sakakita(AIST)
Room E

17:00-17:30<08pC11I>
Invited Lecture
Satoshi Kamiyama
Meijo University"Crystal Growth andFabrication of GaN-BasedMulti-Quantum Shell (MQS)/
Nanowire Lasers"

17:10-17:40<08pE07I>
Invited Lecture
Kiyotaka Sasagawa
Nara Institute of Science andTechnology"Implantable Fluorescent
Imaging Device with Hybrid
Filters"

17:20-17:40 Break

Plasma Science andTechnologies 9
Chair: Sander Nijdam( Eindhoven Universityof Technology)
Room B

17:40-18:10<08pB10I>
Invited Lecture
Jan Lancok
Institute of Physics CAS"Pulsed Lased Deposition of
Copper Halides Thin Films:
Effect of Plasma Parameters
on Optical and Electrical
Properties"

17:30-17:50 1003
<08pC12O>
Pradip Dalapati
Nagoya Institute ofTechnology"Effect of Growth
Temperature on the Epilayer
Quality and the ElectroOptical Performances of
GaInN/GaN Multi-QuantumWell UV Photodetectors"
Pradip Dalapati, Kosuke
Yamamoto, Takashi Egawa
and Makoto Miyoshi
Nagoya Institute of Technology

Nanomaterials 5
Chair: Makoto Kambara( The University of Tokyo)
Room D

17:40-18:10
17:40-18:10<08pD10I><08pE08I>
Invited Lecture
Invited Lecture
Hari Babu Nadendla
Sander Bekeschus
Brunel University London
INP Greifswald"Nano Materials for Advanced "Medical Gas Plasma
Light-Weight Alloy Metals for Technology – the Now and
Next Generation
the Future"
Automobiles"

21

ISPlasma2022/IC-PLANTS2022 March 6 - 10, 2022 Nagoya, Japan

17:50-18:10 1190
<08pC13O>
Amalraj Frank Wilson
Nagoya University"Homoepitaxial Growth of
GaN Using a p-BN Tube
Attached Radical Enhanced
MOCVD (REMOCVD)"Frank Wilson Amalraj,
Dhasiyan Arun Kumar,
Naohiro Shimizu, Osamu
Oda, Kenji Ishikawa andMasaru Hori
Nagoya University

18:10-18:30 1038
18:10-18:30 1099
<08pD11O><08pE09O>
Laika Jayne Montefalcon
Jun-Seok Oh
University of the Philippines- Osaka City University
Diliman"Visualization of Plasma"Fabrication of Ag-Decorated- Affected Area on a 3D Printed
TiO2 Nanofibers for the
Mouse Model"
Photocatalytic Degradation of 1Shunya Hashimoto, 1Yuta
Methylene Blue underMatsumoto, 1Jun-Seok Oh,
1
Simulated Solar Light
Tatsuru Shirafuji, 2Kenji
Irradiation"
Ishikawa and 2Masaru Hori
1
Osaka City University
Laika Jayne Montefalcon,
2
Nagoya University
Mary Raphael Ramoy,
Aranxta Danielle Montallanaand Magdaleno Vasquez Jr.
University of the PhilippinesDiliman

18:30-18:50 2008
<08pE10O>
Mime Kobayashi
Osaka Medical andPharmaceutical University"Non-Thermal AtmosphericPressure Plasma Potentiates
Mesodermal Differentiation of
Human iPS Cells"
1
Mime Kobayashi, 1,2Kiichiro
Tomoda, 3Tetsuji Shimizu,
1
Michio Asahi and 4Shinya
Kumagai
1

Osaka Medical andPharmaceutical University
2
Gladstone Institute ofCardiovascular Disease3
National Institute of Advanced
Industrial Science and Technology(AIST)
4
Meijo University

18:40-19:00 Break

19:00-20:00 Short Presentation (Poster) 3

22

ISPlasma2022/IC-PLANTS2022 March 6 - 10, 2022 Nagoya, Japan

3/9（WED）
Plasma Science &Nitride Semiconductors 6
Nanomaterials 6
Chair: Tsutomu Araki
Chair: Shigeya Naritsuka
Technologies 10
Chair: Tatsuya Shirafuji(Ritsumeikan University)(Meijo University)(Osaka City University) Room C
Room D
Room B

Bio Applications 4
Chair: Minoru Sasaki(Toyota Technological Institute)Shinji Yoshimura(National Institute for Fusion Science)
Room E

9:00-9:30
9:00-9:30<09aD01I><09aE01I>
Invited Lecture
Invited Lecture
Hiroki Hibino
Tetsuji Shimizu
Kwansei Gakuin University
National Institute of Advanced"Controlled Growth ofIndustrial Science andHeterostructures of Graphene Technology (AIST)and Hexagonal Boron Nitride" "Flows Induced by LowTemperature AtmosphericPressure Plasmas"

9:30-10:00<09aB01I>
Invited Lecture
R. Mohan Sankaran
University of Illinois UrbanaChampaign"The Dynamic Plasma-BasedElectrochemical Interface for
the Synthesis of Chemicals
and Materials"

9:30-10:00<09aC01I>
Invited Lecture
Masako Kodera (USA)
Moses Lake Industries, Inc.
"Impact of Plasma-DamagedLayer Removal and AtomicSized Defect Visualization on
GaN Hemt Devices"

9:30-10:00<09aD02I>
Invited Lecture
Hiroki Ago
Kyushu University"2.5-Dimensional Materials
Science: Controlled Growth,Integration, and Applicationsof Graphene and h-BN"

23

9:30-10:00<09aE02I>
Invited Lecture
Toshiya Sakata
The University of Tokyo"Bioelectrical Interfaces for in
Vitro Diagnostics"

ISPlasma2022/IC-PLANTS2022 March 6 - 10, 2022 Nagoya, Japan

10:00-10:30<09aB02I>
Invited Lecture
Takahiro Ishizaki
Shibaura Institute ofTechnology"Solution Plasma Synthesis
of Carbon-BasedElectrocatalysts for CathodeMaterials of Li-Air Battery"

10:00-10:20 1115
<09aC02O>
Taisei Nagai
Nagoya University"Effects of Cl Passivation on
Al2O3/GaN Interface
Properties"
Taisei Nagai, Noriyuki
Taoka, Akio Ohta, Katsunori
Makihara and Seiichi
Miyazaki

10:00-10:30<09aD03I>
Invited Lecture
Yuhei Miyauchi
Kyoto University"Exciton Properties in Oneand Two-Dimensional
Semiconducting
Nanomaterials and their
Applications"

Nagoya University

10:00-10:20 1041
<09aE03O>
Rui-Zhe Zhang
National Chiao Tung
University"Effects of Short-Lived andLong-Lived Reactive Oxygen
and Nitrogen Species
Produced by Non-Thermal
Atmospheric-Pressure
Plasma on Protein"
Rui-Zhe Zhang and YunChien Cheng
National Chiao Tung University

10:30-11:00<09aB03I>
Invited LectureDavid B Go
University of Notre Dame
"Plasma-Liquid Interactions
during Plasma Electrolysis:
Understanding Fundamental
Behavior"

24

ISPlasma2022/IC-PLANTS2022 March 6 - 10, 2022 Nagoya, Japan

10:30-11:00 Break
Plasma Science andTechnologies 11
Chair: Keisuke Takashima(Tohoku University)
Room B

Plasma Science andTechnologies 12
Chair: Masanaga Fukazawa( Sony Semiconductor
Solutions Corporation)
Room C

Nanomaterials 7
Chair: Toshiaki Kato
(Tohoku University)
Room D

11:00-11:20 1030
11:00-11:30<09aC03O><09aD04I>
Thi-Thuy-Nga Nguyen
Invited Lecture
Nagoya University
Takeaki Yajima"Atomic Layer Etching of
Kyushu University
Metal Compounds with
"Next-Generation Switching
Selective Removal of their
Devices Based on MetalCarbides over Nitrides Using Insulator Transitions"a Floating Wire-Assisted
Liquid Vapor Plasma Method"1
Thi-Thuy-Nga Nguyen,
2
Kazunori Shinoda, 2Hirotaka
Hamamura, 3Kenji Maeda,
3
Kenetsu Yokogawa, 3Masaru
Izawa, 1Kenji Ishikawa and1
Masaru Hori

Bio Applications 5
Chair: Shinya Kumagai(Meijyo University)
Hiroshi Hashizume(Nagoya University)
Room E
11:00-11:20 2005
<09aE04O>
Tomoyuki Murakami
Seikei University"Modelling of Cell-Death
Induction in Response to
Plasma-Induced Reactive
Species"Tomoyuki Murakami
Seikei University

1

Nagoya University
Hitachi, Japan3
Hitachi High-Tech, Japan2

11:20-11:40 1173
11:20-11:40 1152
<09aB04O><09aC04O>
Naomichi Ezumi
Shohei Nakamura
University of Tsukuba
Screen Holdings Co., Ltd.
"Observation of Nitrogen"Low Damage Atomic Layer
Assisted/AssociatedEtching of GaN at High
Recombination in Divertor
Temperature"
1,2
Relevant Hydrogen Plasma
Shohei Nakamura, 1Atsushi
of GAMMA 10/PDX"
Tanide, 1Takahiro Kimura,
1
1
Soichi Nadahara, 2Kenji
Naomichi Ezumi, 1Hiroki
Ishikawa, 2Osamu Oda andGamo, 1Tsukasa Sugiyama,
2
1
Masaru Hori
Ayane Kondo, 1Naoki
1
Screen Holdings Co., Ltd.
Shigematsu, 1Takumi Seto,
1
1
Takuma Okamoto, Kousuke 2Nagoya University
Takanashi, 1Satoshi
Takahashi, 1Satoshi Togo,
1
Mafumi Hirata, 1Junko
Kohagura, 1Masayuki
Yoshikawa, 1Yosuke
Nakashima, 1Mizuki
Sakamoto and 2S. Masuzaki
1

University of Tsukuba
National Institute for Fusion Science225

11:20-11:40 1169
<09aE05O>
Guan-Ying Tasi
National Taiwan University of
Science and Technology"Preparation of Functional
Collagen Fibril Microislands
by Photolithography andContact Printing For Inductionof Stem Cell Differentiation"
1
Guan-Ying Tasi, 1Meng-Jiy
Wang and 2Szu-Yuan Chen
1

National Taiwan University of
Science and Technology
2Institute of Atomic and Molecular
Sciences Academia Sinica

ISPlasma2022/IC-PLANTS2022 March 6 - 10, 2022 Nagoya, Japan

11:40-12:00 1166
<09aB05O>
Chunyuan Zhan
Tokyo Institite of Technology"Plasma-enhanced Catalytic
Activity in CO2 Methanation
over Ru(La-Ni)/Al2O3"
1
Chunyuan Zhan, 1Shuya Xu,
2
Hyun-Ha Kim and1
Tomohiro Nozaki
1

11:40-12:00 1185
<09aC05O>
Keita Ichikawa
Nagoya University"Angular Distribution of HighEnergy Ar Ion and Neutral ina 13.56 MHz CapacitivelyCoupled Plasma"1
Keita Ichikawa, 1,2Haruka
Suzuki and 1,2,3Hirotaka
Toyoda11:40-12:00 1149
<09aE06O>
Daiki Ito
Nagoya University"Evaluation of Selective AntiCancer Effect in PlasmaActivated Ringer's Lactate
Solution Produced byRegulated Surrounding
Atmosphere"
Daiki Ito, Naoyuki Iwata,
Kenji Ishikawa, Hiroshi
Hashizume, Kae Nakamura,
Camelia Miron, Hiromasa
Tanaka, Hiroaki kajiyama,
Shinya Toyokuni, Masaaki
Mizuno and Masaru Hori

Tokyo Institite of Technology
1National Institute of Advanced
Nagoya University
Industrial Science and Technology 2Center for Low-temperature(AIST)
Plasma Sciences
3
National Institute for Fusion
Science2

Nagoya University

12:00-12:20 1138
<09pC06O>
Taito Yoshie
Nagoya University"Feature Profiles in Cyclic
Etch Using C4F8 and SF6
Gas-Modulated Plasma "1
Taito Yoshie, 2Takayoshi
Tsutsumi, 2Kenji Ishikawa,
2
Hiroki Kondo, 2Makoto
Sekine and 2Masaru Hori

12:00-12:30<09pD05I>
Invited Lecture
Dang Feng
Shandong University"Cathode Catalytic Capabilityof Two-Dimensional Materials
with Stacking-Layered Crystal
Structure in Li-O2 Batteries"

1

Nagoya University
Center for Low-temperature
Plasma Sciences, Nagoya
University
2

12:20-12:40 1093
<09pB07O>
DAE-YEONG KIMTokyo Institite of Technology"Mechanism Study on
Plasma-Activated CO2
Hydrogenation over Pd2Ga/
SiO2"
1,3
Dae-Yeong Kim, 2Shinya
Furukawa and 1Tomohiro
Nozaki1Tokyo Institute of Technology
Hokkaido University
3
JSPS Research Fellowship (DC2)
2

12:20-12:40 1094
<09pC07O>
Shih-Nan Hsiao
Nagoya University"Manipulation of Etch
Selectivity of Silicon Nitride
over Silicon Dioxide byControlling Substrate
Temperature with a CF4/H2
Plasma"Shih-Nan Hsiao, Nicolay
Britun, Thi-Thuy-Nga
Nguyen, Takayoshi
Tsutsumi, Kenji Ishikawa,
Makoto Sekine and Masaru
Hori
Nagoya University

26

ISPlasma2022/IC-PLANTS2022 March 6 - 10, 2022 Nagoya, Japan

12:40-13:00 1039
<09pB08O>
Xiaozhong Chen
Tokyo Institite of Technology"Fluidized-Bed DBD Reactor
for Kinetic Study of Reverse
Water Gas Shift Reaction"
1
Xiaozhong Chen, 2Shinya
Furukawa and 1Tomohiro
Nozaki1
2Tokyo Institite of Technology
Hokkaido University

12:30-13:30 Break
Plasma Science andTechnologies 13
Chair: Tomohiro Nozaki( Tokyo Institute ofTechnology)
Room B

13:30-14:00<09pB09I>
Invited Lecture
Wei-Hung Chiang
National Taiwan University of
Science and Technology"Microplasma Engineering ofFunctional Nanomaterials:
Synthesis and Applications "Room C

Nanomaterials 8
Chair: Hideki Sato
(Mie University)
Room D
13:30-13:50 1176
<09pD06O>
Shiyu Zhang
Nagoya University"Formation of NonEquilibrium Ge1-xSnx/SixGe1-xySny Double-Quantum Wells
and its Photoluminescence
Property"
Shiyu Zhang, Shigehisa
Shibayama, and Osamu
Nakatsuka
Nagoya University

Bio Applications 5
Chair: Shinya Kumagai(Meijo University)
Minoru Sasaki(Toyota Technological Institute)
Room E
13:30-13:50 1095
<09pE07O>
Hiroshi Hashizume
Nagoya University"Quality-Increasing Effect ofPlasma Treatment in a Paddy
on Various Rice Cultivars"
1
Hiroshi Hashizume, 1Hidemi
Kitano, 1Hiroko Mizuno,
1
Akiko Abe, 1Kaoru Sanda,
2
Genki Yuasa, 2Satoe Tohno,
1
Hiromasa Tanaka, 1Kenji
Ishikawa, 1Shogo Matsumoto,1
Hitoshi Sakakibara, 2Susumu
Nikawa, 1Masayoshi
Maeshima, 1Masaaki Mizuno
and 1Masaru Hori
1

Nagoya University
Fujitsu Client Computing Limited

2

27

ISPlasma2022/IC-PLANTS2022 March 6 - 10, 2022 Nagoya, Japan

14:00-14:30<09pB10I>
Invited Lecture
Mohan Jacob
James Cook University"Applications of Graphene
Synthesised by Microwave
Plasma"13:50-14:10 1110
13:50-14:10 1111
<09pD07O><09pE08O>
Masayuki Tokitani
Yang Liu
National Institute for Fusion
Nagoya University
Science"Genotoxic Efects of Plasma"Advanced Multi-Step Brazing Activated Ringer's Lactate(AMSB) for Fabrication of the Solution on Cancer Cells."
New Type W/ODS-Cu Plasma 1Yang Liu, 2Yoshimichi
Facing Components"
Nakatsu, 1Hiromasa Tanaka,
2
1
Kazunori Koga, 1Kenji
Masayuki Tokitani, 2Toyo
21Ishikawa,
Masaharu
Yamashita, Yukinori Hamaji,
3
1
Shiratani and 1Masaru Hori
Yutaka Hiraoka, Hiroyuki
1
Nagoya University
Hoto, 1Suguru Masuzaki,
4
4
Tatsuya Tsuneyoshi, Yoshiyuki 2Kyushu University
Tsuji, 1Takeo Muroga, 5Shun
Shimabukuro, 5Naoaki
Yoshida, 5Hiroshi Idei, 5Kaori
Kono, 5Makoto Oya, 5Takumi
Onchi and 5Ryuya Ikezoe
1National Institute for Fusion Science
The Graduate University for
Advanced Studies, SOKENDAI
3
Okayama University of Science
4
Nagoya University
5
Kyushu University
2

14:10-14:30 1012
14:10-14:30 1053
<09pD08O><09pE09O>
Yazid Yaakob
Hayate Tanaka
Nagoya Institute of
Kyushu University
Technology"Effects of Concentration of"Structural and Electrical
Plasma Activated Lactate on
Properties of Silicon-Carbon Germination of Arabidopsis
Nanocomposites for Potential thaliana Seeds"
1
Anode Materials in LithiumHayate Tanaka, 1Takamasa
Ion Batteries"
Okumura, 1Pankaj Attri,
1
1
1,2
Yazid Yaakob, 1Mohd Saufi Teruki Anan, Kunihiro
111
Kamataki,
Naho
Itagaki,
Rosmi, Subash Sharma, Wei
1
Masaharu Shiratani, 1Yushi
Ming Lin and 1Masaki
Ishibashi, 2Masataka Nakao
Tanemura
2
1
Kentaro Namiki, 2Shoko
Nagoya Institute of Technology
2
Tsuboyama, 2Kenji Hashimoto,
Universiti Putra Malaysia
2
Kazuyuki Kuchitsu, 3Hiroshi
Hashizume, 3Kenji Ishikawa,
3
Masaru Hori, and 1,4Kazunori
Koga
1

Kyushu University
Tokyo University of Science
3
Nagoya University
4
National Institutes of Natural Science2

14:30-15:00 BreakKeynote Lecture
Chair: Masaru Hori (Nagoya University)
Room A
15:00-15:40<09pA11K>
Keynote Lecture
Takanori Ichiki
The University of Tokyo"Novel Diagnostic and Therapeutic Approaches Using Exosomes and Nanobiodevices"

15:40-16:00 Break28

ISPlasma2022/IC-PLANTS2022 March 6 - 10, 2022 Nagoya, Japan

Plasma Science andTechnologies 14
Chair: Mohan Jacob(James Cook University)
Room B

Plasma Science andNanomaterials 9
Chair: Jun Tatebayashi
Technologies 15
Chair: Nozomi Takeuchi(Osaka University)(Tokyo Institute of Technology) Room D
Room C

16:00-16:20 1023
<09pB12O>
Yasunori Tanaka
Kanazawa University"Experimental and Numerical
Approaches to Polycrystalline
Diamond Film Deposition
Using Time-Series Exposureof Modulated/Non-Modulated
Induction Thermal Plasmas"
Yasunori Tanaka, Kazufumi
Hata, Naoki Kano, Yusuke
Nakano and Tatsuo Ishijima

16:00-16:20 1096
16:00-16:30<09pC12O><09pD12I>
Shigeyuki Takagi
Invited Lecture
Tokyo University of
Katsuhiro Tomioka
Technology
Hokkaido University"Optimization of RF"Integration of III-V Nanowires
Frequency in Dual-Frequency on Si and their Device
Capacitively Coupled Plasma Applications"
Equipment Using Coupled
Calculation of Plasma
Simulation and Genetic
Algorithm (GA)"1
Shigeyuki Takagi,
1
Tatsuhiro Nakaegawa and2
Makoto Sekine

Kanazawa University

1
2

16:20-16:40 1143
<09pB13O>
Kazunori Koga
Kyushu University"Deposition of Carbon
Nanoparticles of 5 nm in Sizeon Positively Biased
Substrates Using MultiHollow Discharge Plasma
CVD Method"
1,2
Kazunori Koga, 1Sung Hwa
Hwang, 1Shinjiro Ono,
1
Daichi Yoshikawa,1
Takamasa Okumura,
1
Kunihiro Kamataki, 1Naoto
Yamashita, 1Naho Itagaki
and 1Masaharu Shiratani

Tokyo University of Technology
Nagoya University

16:20-16:40 1100
<09pC13O>
Tatsuru Shirafuji
Osaka City University"Numerical Simulation ofSurface-Launched Plasma
Bullets"
Tatsuru Shirafuji and JunSeok Oh
Osaka City University

16:30-17:00<09pD13I>
Invited Lecture
Tuyoshi Hasegawa
Waseda University"Application of the Atomic
Swtich Technology to
Neuromorphic Computing"1

Kyushu University
National Institutes of Natural
Sciences2

16:40-17:00 1145
16:40-17:00 1139
<09pB14O><09pC14O>
Jumpei Kurokawa
Dogyun Hwangbo
Nagoya University
University of Tsukuba"Correlation Analysis between "Motion Analysis of Arc Spots
Radicals in Gas Phase andon Tungsten Fuzz by Means
Etch Resistance ofof Self-Avoiding Random
Hydrogenated Amorphous
Walk Model"
1
Carbon Film"
Dogyun Hwangbo, 2Daisuke
1
Nishijima, 3Shin Kajita andJumpei Kurokawa,
3
2,3
Noriyasu Ohno
Tadashi Mitsunari,
2
2
Takayoshi Tsutsumi, Hiroki 1University of Tsukuba
2
University of California, San Diego
Kondo, 2Makoto Sekine,
2
2
Kenji Ishikawa and Masaru 3Nagoya University
Hori
1

Nagoya University
Center for Low-temperature
Plasma Sciences
3
Tokyo Electron Technology
Solutions Limited2

29

Room EISPlasma2022/IC-PLANTS2022 March 6 - 10, 2022 Nagoya, Japan

17:00-17:20 1121
<09pB15O>
Ching-Lien Hsiao
Linkoping University/Thin
Film Physics Division"Mechanism on Growth Rate
Increase of Magnetron
Sputtering GaN Using
Positive Substrate Bias"
1
Ching-Lien Hsiao, 1Yi-Ling
Lo, 1Jui-Che Chang, 2Daniel
Lundin, 3Igor Zhirkov,
1
Aditya Prabaswara, 1Per
Sandström, 3Johanna Rosén,
1
Lars Hultman and 1Jens
Birch
1

Linkoping University/Thin Film
Physics Division
2
Linkoping University/Plasma andCoatings Physics Division
3
Linkoping University/Materials
Design Division

17:00-17:20 1085
17:00-17:20 1074
<09pC15O><09pD14O>
Haolun Li
Yoshitsune Ito
Kyoto Institute of Technology Nagoya University"Reactive Molecular Dynamics "Formation of Calcium
Simulations on Intramolecular Disilicide Films on Si(111)and Intermolecular Structural Using Molecular Beam
Changes of Damaged
Epitaxy"
Polyethylene Chains"
Yoshitsune Ito, Osamu
1
Nakatsuka and Masashi
Haolun Li, 1Susumu
Kurosawa
Fujiwara, 2,3Hiroaki
Nagoya University
Nakamura, 1Tomoko
4
Mizuguchi, Ayako Nakata,4
Tsuyoshi Miyazaki, 5Shinji
Saito and 1Wataru Sakai
1

Kyoto Institute of Technology
National Institute for Fusion
Science3
Nagoya University
4
National Institute for Materials
Science5Institute for Molecular Science2

17:20-17:40 Break
Plasma Science andTechnologies 16
Chair: Giichiro Uchida(Meijo University)
Room B
17:40-18:10<09pB16I>
Invited Lecture
Dingxin Liu
Xi'an Jiaotong University"Production of High Valance
RNS by Cold Atmospheric
Plasma and their Biomedical
Effects"

Room C

Nanomaterials 10
Chair: Takashi Itoh
(Gifu University)
Room D

Bio Applications 7
Chair: Hiromasa Tanaka(Nagoya University)
Hirofumi Kurita(Toyohashi University of Technology)
Room E

17:40-18:10<09pD15I>
Invited Lecture
Takashi Kita
Kobe University"Control of Quantum-Dot
Growth for Novel Solar Cells"

17:40-18:10<09pE12I>
Invited Lecture
Cristina Canal
Universitat Politècnica deCatalunya (UPC)"Plasma-Conditioned Liquids
in Bone Cancer Therapy"

30

ISPlasma2022/IC-PLANTS2022 March 6 - 10, 2022 Nagoya, Japan

18:10-18:40<09pB17I>
Invited Lecture
Timo Gans
Dublin City University"Experimental andComputational Approaches inControlling Plasma Chemical
Kinetics: Validation, Synergy
and Limitations"

18:10-18:40
18:10-18:30 1151
<09pD16I><09pE13O>
Camelia Miron
Invited Lecture
Nagoya University
Hirofumi Tanaka"Physicochemical
Kyushu Institute ofInvestigation of Plasma
Technology
Activated Lactate Solutions""In-Materio Computing
Devices Consisted of Random 1Camelia Miron, 1Nikolay
Network Nanoparticles for
Britun, 1Hiroki Kondo, 2Kae
1
Autonomous Robot Operation Nakamura, Hiroshi
1Hashizume,
Hiromasa
Systems"
1
Tanaka, Kenji Ishikawa and1
Masaru Hori
1

Nagoya University
Nagoya University Graduate
School of Medicine, Department of
Obstetrics and Gynecology
2

18:30-18:50 1109
<09pE14O>
Chih-Tung Liu
Department of MechanicalEngineering, National Yang
Ming Chiao Tung University"Chronic Wound Healing on
Type-1 Diabetes of Rat
Models Using a Nitrogen and
Argon Atmospheric-Pressure
Plasma Jet"
1
Tien-Yang Chou-Huang,
2,3
Yu-Pin Cheng, 1Chih-Chia
Lee, 1Chih-Tung Liu, 1KuangYao Cheng, 1Mu-Chien Wu,
1
Chun-Ping Hsiao, 1Shih-Sen
Huang and 1Jong-Shinn Wu
1

Department of MechanicalEngineering, National Yang Ming
Chiao Tung University
2
Department of Biological Scienceand Technology, National Yang
Ming Chiao Tung University
3
Department of Dermatology,
Cathay General Hospital

18:40-19:00 Break

19:00-20:00 Short Presentation (Poster) 4

31

ISPlasma2022/IC-PLANTS2022 March 6 - 10, 2022 Nagoya, Japan

3/10（THU）
Invited Lecture
Chair: Makoto Kambara (The University of Tokyo)
Kenji Ishikawa (Nagoya University)
Room A
9:00-9:30<10aA01I>
Invited Lecture
Yuki K. Wakabayashi
NTT Basic Research Laboratories"Machine-Learning-Assisted Molecular Beam Epitaxy for Growth of High-Quality Magnetic Oxides"

9:30-10:00<10aA02I>
Invited Lecture
Takeshi Ohmori
Hitachi, Ltd.
"Applying Machine Learning Methods to Etching Process Development"

10:00-10:30<10aA03I>
Invited Lecture
Daisuke Nishijima
University of California, San Diego"Application of Hyperspectral Imaging and Machine Learning to Low Temperature
Plasma Research"

10:30-11:00 Break
11:00-11:30<10aA04I>
Invited Lecture
Satoshi Hamaguchi
Osaka University"Machine-Learning Based Analyses of Plasma Processing"

11:30-12:00<10aA05I>
Invited Lecture
Hae June Lee
Pusan National University"Combined Simulation of Micro and Nanoparticles in RF Inductively Coupled Plasma Torch"

12:00-12:30 Break32

ISPlasma2022/IC-PLANTS2022 March 6 - 10, 2022 Nagoya, Japan

12:30-13:00<10pA06I>
Invited Lecture
Satoru Kawaguchi
Seikei University"Application of Machine Learning to Solving Boltzmann Equation for Electron Velocity Distribution Function in Weakly
Ionized Plasma"

13:00-13:30 Panel Discussion

13:30-15:00 BreakInvited Lecture
Chair: Yoshihiro Kangawa (Kyushu University)
Kenji Ishikawa (Nagoya University)
Room A
15:00-15:30<10pA08I>
Invited Lecture
Masafumi Jinno
Ehime University"Plasma Mediated Spontaneous Cell Membrane Permeation and its Applications:
Endocytosis and Random Genome Integration-Free"

15:30-16:00<10pA09I>
Invited Lecture
Ryo Tanaka
FUJI ELECTRIC CO., LTD.
"Recent Development and Future Prospects of Vertical GaN Power Devices"

16:00-16:30<10pA10I>
Invited Lecture
Kengo Nagata
Nagoya University and Toyoda Gosei Co., Ltd.
"Development of High-Efficiency Algan Tunnel Junction Deep-UV Leds"

16:30-17:00 BreakKeynote Lecture
Chair: Yoshihiro Kangawa (Kyushu University)
Room A33

ISPlasma2022/IC-PLANTS2022 March 6 - 10, 2022 Nagoya, Japan

17:00-17:40<10pA11K>
Keynote Lecture
Tim Wernicke
Technische Universität Berlin, GERMANY"Growth, Fabrication and Analysis of Algan-Based Deep UV LEDs"

17:40-18:00 Break

18:00-18:30 Award Ceremony and Closing

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