2022 CORPORATE SOCIAL RESPONSIBILITY REPORTUNLEASHING A WORLDOF POSSIBILITIES2Table ofContents

32022 CSR Highlights

4Letter from Our President and CEO

5

CSR Strategy and Goals

10

Reporting Approach

11

Pillar One: Innovation

16

Pillar Two: Safety

22

Pillar Three: Personal Development andInclusion

29

Pillar Four: Sustainability

36

Supply Chain

40

Data Appendix

Cover image: A satellite image of the Earth from the NASA Image Library

ENTEGRIS, INC.

32022 CSR HIGHLIGHTS

2022 CSR Highlights
In 2022, we made substantial strides toward achieving our 2030 Corporate Social
Responsibility (CSR) goals, significantly expanding our positive impact across the four
key pillars of our CSR strategy: Innovation, Safety, Personal Development and Inclusion,and Sustainability.
Notable highlights from the year include:A
RatingAdvancing our sustainability efforts through a

17%

27%

and

reduction inwater intensity

Awarded from MCSI*

reduction in energy
per revenue dollar
vs. 2020 baseline90%

Our Munmak, Korea, office washonored with the Excellence for
Ergonomic Work Improvement
Award by the Ergonomics
Society of Korea

of team members believed we
provide a safe place to work
Incorporated

67%

39%

65%

of our team members
participated in proactive
safety reportingof new hires in engineering roles
were women and individuals
from underrepresented groupsof underrepresented
groups into our co-op
and internship programs

Gold
ratingAwarded by EcoVadis with a ranking in
the 97th percentile**

Grantedworth a total of

36 $500,000
scholarships

to STEM students in the U.S. and Asia

*Published December 2021**Awarded October 2023

ENTEGRIS, INC.

4

LETTER FROM OUR PRESIDENT AND CEO

I am very pleased with the significant accomplishments of our team. Our Corporate
Social Responsibility (CSR) performance during 2022 underscores the strengthof our resolve to serve our customers while bringing about positive change. Ourcommitments have propelled us toward creating a more inclusive and sustainable
world. Through initiatives like scholarships and internships for underrepresented
students, we are helping the next generation of talent develop the skills andexpertise needed to address the challenges our communities face. By leveraging
our solutions-driven mindset, we are furthering our innovative legacy by prioritizing
how we conserve our natural resources and protect our planet.
Our mission and PACE Values (People and Teamwork; Accountability, Integrity, andTrust; Creativity and Innovation; Dedication to Excellence) guide every aspect of
our operations. They serve as the cornerstone for our CSR strategy, which revolves
around four key pillars: Innovation, Safety, Personal Development and Inclusion,and Sustainability. With these principles as our foundation, we are committed tocreating a better future within our industry ecosystem and for the world at large.
In 2022, we achieved a significant milestone by successfully completing theacquisition of CMC Materials. This strategic move positioned us as a global leader
in electronic materials, strengthening our role in the semiconductor industry.
Additionally, we recently celebrated the grand opening of a new manufacturing
facility at Kaohsiung Science Park in Taiwan, and we also have broken groundon a new facility in Colorado Springs. Both of these facilities are designed tooperate in a sustainable manner that reduces our environmental footprint. They
will be dedicated to producing the essential components for semiconductor
manufacturing on a global scale that are critical to supporting our customers’
technology roadmaps.
This is an important moment in our CSR journey. We are proud of the progress wehave made since launching our strategy and 2030 goals in 2020, but we recognize
we can do even more. We are setting our aspirations even higher as we advance our
mission of using our science-based knowledge and innovation engine to transformthe human experience and improve the well-being of our communities. With the
publication of our 2022 CSR report, we are pleased to introduce throughout thisreport new and updated 2030 goals that take into account our rapid progress andthe recent acquisition of CMC Materials and related divestitures. These goals will
guide us into the future as we work to unleash a world of possibilities.
The hard work and dedication of our exceptional team members and valued
business partners play a pivotal role in driving meaningful advancements across
our organization. Without them, none of this is possible. I invite all our stakeholders
to learn more about the guiding pillars that shape our framework, along with theprogress we have accomplished, and the approaches that will steer us forward. I
look forward to your feedback, and together, we will continue on our path toward amore sustainable future.

Bertrand Loy
President, Chief Executive Officer, and Chair of the Board of Directors

ENTEGRIS, INC.

5

CSR STRATEGY AND GOALSCSR STRATEGY AND GOALSOur Corporate Social Responsibility (CSR) framework includes
four fundamental pillars:

Innovation

SafetyProfessional
Development
and Inclusion

Sustainability

We leverage ourinnovation engine toenable leading-edge
technologies thattransform the world
and foster positive
impact within the
global community.

By adhering torigorous safety
standards, weensure safety in theworkforce and in
the products weoffer to our valued
customers.

We support the
professional
development andgrowth of ourcolleagues bycreating a diverse
and inclusive
workplace where
everyone is treatedwith respectand dignity.

We aim to limit the
impact our global
operations have on
the environment
by reducing ouremissions, energy,
water, and waste.

We formalized this strategy and announced our 2030 goals in 2020.
Since then, we have embedded CSR efforts in our business strategy
and operations and enhanced our ability to measure our impact. We
have also learned more about our areas of strength and opportunity
across our CSR priorities resulting from engagement with internaland external stakeholders.

ENTEGRIS, INC.

6

CSR STRATEGY AND GOALS

2030 CSR GOALSIn this important moment in our CSR
journey, we are further advancing ourstrategy and our 2030 goals. We are pleased
to share progress against the goals we set
in 2020 as well as introduce evolved 2030
goals that help set our aspirations evenhigher and guide us into the future. We lookforward to reporting progress against thesegoals moving forward.
In Innovation, we are adapting our goals
to align with changing industries andfuture customer demands. By 2030, ourobjectives include ensuring 100% alignmentof product innovation with sustainability
goals, implementing end-of-use andcircular economy strategies for major
product platforms, and allocating over 55%
of operating expenses to research anddevelopment (R&D).

ensuring 100% participation in proactive
safety activities.
Additionally, we are enhancing ourcommitment to Professional Development
and Inclusion by investing over $35 million
in STEM scholarships and internships, aim tofill more than 50% of new engineering rolesand 40% of all leadership roles with women
and/or individuals from underrepresented
groups, and implementing careerdevelopment plans with 80 hours annuallyof learning per person.
Finally, in our Sustainability efforts, we aim
to reduce our scope 1 and 2 greenhousegas emissions by 42%, decrease water
usage by over 50% per Entegris revenue
dollar, and reduce landfill waste per Entegris
revenue dollar by more than 50%.
These goals represent our dedication totransforming industries, ensuring safety,
fostering inclusivity, and protecting
the environment.

In Safety, we are committed to achieving
an injury-free work environment, fostering
a culture where at least 95% of colleaguesview Entegris as a safe place to work, and

INNOVATION
EXISTING 2030 GOALS

MOVING FORWARD 2030 GOALS

Invest at least 55% of our operating
expenditures in R&D

Invest at least 55% of our operating
expenditures in R&D

Align 100% of R&D to advance
U.N. SDGs

Align 100% of new product innovation
with our sustainability goals

Commit 100% of Entegris’ innovation
portfolio to advancing customers’
technology roadmaps

NEW

NEW

Establish end-of-use, circular
economy strategy for our major
product platforms

ENTEGRIS, INC.

7

CSR STRATEGY AND GOALSSAFETYEXISTING 2030 GOALS

MOVING FORWARD 2030 GOALS

Commit to achieving an injury-freework environment at Entegris

Commit to achieving an injury-freework environment at Entegris

Create a culture where at least 95% of
our colleagues agree that “Entegris is asafe place to work“

Create a culture where at least 95% of
our colleagues agree that “Entegris is asafe place to work“

Achieve 100% participation rate inproactive safety activities at operating
locations

Achieve 100% participation rate inproactive safety activities at operating
locationsPERSONAL DEVELOPMENT AND INCLUSION (PD&I)
EXISTING 2030 GOALS

MOVING FORWARD 2030 GOALS

Aim to fill more than 50% of newengineering roles with women
and/or individuals fromunderrepresented groups

Aim to fill more than 50% of newengineering roles and 40% of allleadership roles with women
and/or individuals fromunderrepresented groups

Invest more than $30 million in
STEM scholarships and engineeringinternships for women and individuals
from underrepresented groups
Increase participation in real-timelearning opportunities and internal
training hours by more than five times
the hours completed in 2020

UPDATEDUPDATEDNEW

Invest more than $35 million in
STEM scholarships and engineeringinternships for women and individuals
from underrepresented groups
Formalize career development plans
for all employees, including an annual
average of 80 hours of learning
per employee

ENTEGRIS, INC.

8

CSR STRATEGY AND GOALSSUSTAINABILITY
EXISTING 2030 GOALS
Achieve 100% electricity
consumption generated
from renewable sources,
where available

Reduce energy consumption
by more than 20% per Entegris
revenue dollar from the2020 baseline

MOVING FORWARD 2030 GOALSNEW
Energy conservation
is an importantelement of ourgreenhouse gas(GHG) reduction
plan. We willcontinue to reportprogress as part ofour GHG tracking.

Reduce absolute greenhouse gas
emissions (Scope 1 and 2) by 42%

Decrease water usage per Entegris
revenue dollar by more than 50%

Decrease water usage per Entegris
revenue dollar by more than 50%

N/A

Reduce landfill waste by morethan 50% in metric tons per
Entegris revenue dollar

NEW

ENTEGRIS, INC.

9

CSR STRATEGY AND GOALSMISSION AND
VALUESCORPORATESOCIALRESPONSIBILITY
GOVERNANCE

Entegris is committed to upholding ethical standards and integrity in ourbusiness conduct. Our business operations and corporate governancerevolve around our PACE Values: People and Teamwork; Accountability,
Integrity, and Trust; Creativity and Innovation; and Dedication to
Excellence. These values are exemplified in our Code of Business Ethics, a
global directive that outlines the ethical standards governing the behaviorof our worldwide team.

Entegris’ board of directors oversees the company’s CSR program. Our
directors remain consistently informed by senior management throughout
the year. The board recognizes that the interests of our shareholders are
best advanced when also considering other stakeholders, including ourcustomers, the Entegris team, business associates, and the communities inwhich we operate.
Recently, a new Environmental, Health, Safety and Sustainability (EHS&S)
board committee was formed to aid the board of directors in overseeing
and periodically reviewing the company’s endeavors encompassing
health, safety, environmental matters, sustainability, and regulatory topics.
This committee evaluates the influence of these strategies and makes
recommendations to the directors regarding these issues. For moredetails, see our charter for the EHS&S committee.
Our CSR Council was formed in 2020 and is composed of members
from our senior management team who hold direct responsibility for
setting the agenda and advancing the four pillars of our CSR strategy.
The CSR Council is led by Bertrand Loy, president and chief executive
officer, and Bill Seymour, vice president of investor relations, treasury, andcommunications, and includes: Joe Colella, senior vice president, general
counsel, and chief compliance officer; Jason Goodwin, vice presidentof global environmental, health, safety, and sustainability; Nina Haugen,director CSR; Linda LaGorga, chief financial officer; Jim O’Neill, senior vicepresident and chief technology officer; Sue Rice, senior vice presidentof human resources; and Neil Richards, senior vice president of global
operations, supply chain, and quality.
The CSR Council meets on a frequent basis to assess progress and plansfor each of our four pillars. The attainment of our CSR objectives is acomponent of the annual performance targets for our senior leaders.

ENTEGRIS, INC.

10

REPORTING APPROACHREPORTING APPROACH
We maintain our alignment with the United Nations Sustainable
Development Goals (U.N. SDGs) and Sustainability Accounting Standards
Board (SASB). In this report, we aim to further align with the Taskforce for
Climate-Related Financial Disclosure (TCFD), a framework designed toenhance reporting on climate change-related financial risks. Additionally,
we commit to complying with any climate-related disclosure
requirements set by applicable regulatory bodies.

U.N. SUSTAINABLE
DEVELOPMENT GOALS

MATERIALITY ASSESSMENT

Our report provides stakeholders with acomprehensive view of our progress toward
our 2030 goals, developed in alignment withkey frameworks such as the U.N. SDGs. These
guidelines have enabled us to prioritize andeffectively address crucial global issues, as
reflected in our commitment to the four main
pillars in our future Corporate Social Responsibility(CSR) endeavors: Innovation, Safety, Personal
Development and Inclusion, and Sustainability.

In 2020, we conducted a preliminary assessment
which contributed to shaping our CSR strategy
and our reporting methodology. Our assessment
encompassed an examination of industry bestpractices and reporting guidelines relating tosustainability and corporate responsibility, notably
including SASB.

By focusing on these areas, we come together asan organization to build a sustainable, inclusive,and forward-thinking company. It also serves as atestament to the work we have accomplished thus
far and inspires us to confront global challenges
head-on in the future.

In 2021, we took a more direct approach byengaging stakeholders, investors, customers, andEntegris colleagues to better understand theirperspectives on the issues that are relevant to ourbusiness, our CSR strategy, and align with the U.N.
SDGs. From over 300 responses we received, these
insights helped guide us in prioritizing issues mostimportant to our business and our stakeholders andto inform our ongoing strategic reporting.

ENTEGRIS, INC.

11

PILLAR ONEINNOVATION
At Entegris, we strive to provide innovative solutions to ourcustomers that fulfill their technology roadmaps, while
simultaneously developing a pipeline of new advancements that
anticipate future technology or societal challenges. To that end,
we are increasingly emphasizing sustainability and efficiency in
our focus, alongside our commitment to develop groundbreaking
technologies that push the limits of scientific capabilities.

U N I T E D N AT I O N S
S U S TA I N A B L E
DEVELOPMENTGOALS

ENTEGRIS, INC.

12

PILLAR ONEINNOVATIONPROGRESS TOWARD OUR
2030 INNOVATION GOALS
Our vision for 2030 involves heightened Research andDevelopment (R&D) investments and aligning our innovation
strategy with advanced technologies. We have updated ourInnovation Pillar goals to closely align with evolving industries
and future customer needs. We will begin reporting progresson these new goals in the 2023 Entegris Corporate Social
Responsibility (CSR) Report with ongoing work on datacollection and reporting.

Invest at least 55% of ouroperating expenditures in R&D
Between 2020 and 2022, weconsistently allocated 37% of
our operating expenses to R&D.
This encompassed advanced
materials research crucial for
optimal semiconductor device
performance, alongside polymer
science advancements ensuring
the essential chemical purity
for maximizing manufacturing
yield. Notably, as of the firsthalf of 2023, we have increased
our commitment to R&D with
our investment now standingat 40%. This level of investment
will amplify our capacity to forge
groundbreaking technologies that
support our customers and foster
the enduring viability ofour business.

Align 100% of Entegris’
innovation portfolio toadvance the U.N. SDGs
In 2022, we adjusted this objective
to better concentrate on projects
that align more closely with
our sustainability targets. In thepreceding year, all of our researchand development investments
corresponded with at least one
United Nations Sustainable
Development Goal (U.N. SDG).
In 2022, we achieved 100%alignment and achieved ourgoal. While advancing the U.N.
SDGs continues to be a priority
for our organization, we havediscontinued this goal to focus ourinnovation efforts on advancing
our sustainability goals between
now and 2030.

Commit 100% of Entegris’
innovation portfolio toadvancing customers’
technology roadmaps
Directing our resources toward
our global Entegris technology
centers to foster bettercollaboration with our worldwide
customers is among our major
priorities as a company. In 2021,
we successfully achieved ourgoal of allocating our entire
innovation portfolio to support theadvancement of our customers’
technological plans. With thismomentum, we were able toachieve our 100% commitment in
2022 and therefore we decided
to discontinue this objective. This
goal is closely tied to our customer
collaboration Flywheel Model,
highlighting its essential role indriving our overall success.

ENTEGRIS, INC.

13

PILLAR ONEINNOVATION

NEW: Align 100% of new
product innovation with oursustainability goals

NEW: Establish end-of-use,
circular economy strategy forour major product platforms

Having successfully met our goalof aligning our R&D portfoliowith customer roadmaps
through collaborative Flywheel
Model engagement sessions,
we have reshaped our goal.
The new focus addresses a
primary customer concern— sustainability. Our updated
target ensures 100% alignmentof new products in developmentwith our Sustainability Pillar
goals, encompassing reduced
resource consumption, decreased
greenhouse gas (GHG) emissions,and minimized waste generation.

To amplify our dedication tosustainability, we also have refined
our third innovation goal. This
includes offering comprehensive
end-of-use guidance to ourcustomers across major productplatforms, aiding them in fulfilling
their sustainability objectives.
We believe this new goal willmore directly contribute to ourcustomers and the environment,
presenting opportunities to create
a greater positive impact.

Moving Forward – 2030 Innovation Pillar Goals• Invest at least 55% of our operating expenditures in R&D• Align 100% of new product innovation with our sustainability goals• Establish end-of-use, circular economy strategy for our major product platforms

ENTEGRIS, INC.

14

PILLAR ONEINNOVATIONCONVENING THE ENTEGRISINNOVATION COMMUNITY

INTEGRATING INNOVATIONCAPABILITIES

Entegris hosted its 4th Innovation Summit during
the week of October 10, 2022, at Babson College inWellesley, Massachusetts. Over 200 individuals fromthe Entegris team participated virtually and in person,
facilitating global networking, knowledge sharing,and collaborative problem-solving for crucial
challenges. This event featured external keynotes,
internal presentations, roundtable discussions, andinteractive workshops, culminating in ongoingprojects for 2023. Sustainability was a focal point
this year with a dedicated half-day session including
a keynote by Semiconductor Research Company
President Todd Younkin and a panel discussion onsustainability initiatives across divisions and sites.

The integration of CMC Materials into our portfolio
in July 2022 better positions Entegris to evaluate
unit process interactions within semiconductor
technologies. A cross-divisional initiative launchedin 2023 aims to expedite the integration of newmaterials, leveraging optimized unit steps in
an integrated module. This approach seeks toenhance materials innovation introduction, shorten
development cycles, and accelerate time to market,
offering reduced risk and speed compared tocompetitors. Our customers face the challenges
of increasing device fabrication complexity anda sensitivity to ever smaller defects making thechallenge of improving yields more difficult. Entegris’
ability to combine capabilities across processmodules and provide more complete materials
solutions accelerates our customers’ integration
learning and accelerates their speed to yield.

ENTEGRIS, INC.

15

PILLAR ONEINNOVATIONLOOKING AHEAD
As we progress further toward achieving our innovation
goals by 2030, here are several concrete steps we are
actively taking to ensure the fulfillment of our commitments.

•

Entegris is constructing a stateof-the-art technology center at
Hanyang University in responseto the growing significance of the
Korean semiconductor ecosystem.
This facility will house a chemicalmechanical planarization (CMP)
excellence hub, analyticalcapabilities, and application labs,
fostering direct collaboration
with customers to advancelogic, DRAM, and 3D NAND
semiconductor technologies.

•

Entegris’ Surface Preparation
and Integration business unit,
in collaboration with memory
manufacturers, is taking on theindustry challenges posed byshrinking DRAM devices beyond
the 10 nm process node withnew formulated chemistries. As
memory technology is adopting
vertical stacking of cells instead ofsimple scaling and high bandwidth
memory is evolving from 2D tohybrid bonded 16-layer stacks for
improved signal and heat efficiency,
new innovations are required.
These include monolithic 3D DRAM
only enabled by selective wet
chemistries as these formulations
provide the ability to cleanly
delineate high aspect ratio featuresat exceedingly small dimensions inthese advanced devices.

•

The growing demand forsustainable energy has led toincreased focus on hydrogenas a vital fuel source, employedin efficient combustion engines
or fuel cells for transportationand energy storage. Entegris’
advanced technologies forhydrogen purification, developed
for semiconductor applications,
are now being adapted toaccelerate the shift towardgreener energy solutions by
ensuring high-purity hydrogenfor various energy applications.

ENTEGRIS, INC.

16

PILLAR TWO

SAFETYAt Entegris, workplace safety is our most important value, andwe continually explore and implement innovative solutions toenhance the health, safety, and well-being of our team members
throughout the organization.
Our commitment to achieving safety excellence remains
unwavering. We hold ourselves to stringent standards ensuring
safe working conditions for all team members and consistently
strive to exceed these high benchmarks. Our dedication extends
to investing in innovative practices and technologies across our
manufacturing facilities and proactively eliminating hazards inthe workplace.
A strong culture of safety is central to our success, and it extends
from team members to our customers. Each Entegris teammember is expected to integrate safe work principles into their
daily activities with accountability being the driving force thathelps us achieve safety excellence, fostering trust, high quality,
and reliability in every aspect of our operations.

U N I T E D N AT I O N S
S U S TA I N A B L E
DEVELOPMENTGOALS

ENTEGRIS, INC.

PILLAR TWO

SAFETY

17

PROGRESS TOWARD OUR
2030 SAFETY GOALS
Entegris is dedicated to establishing itself as an industry
leader in workplace safety. Our environmental, health,and safety (EHS) goals are collaboratively developed by
the Global EHS and business teams to improveengagement and adoption, as well as prioritize program
and workplace conditions.
Since our acquisition of CMC Materials in July 2022, ourteams have been focused on establishing a seamlessand cohesive safety culture across our global footprint,
including the integration of our employee health andsafety processes, programs, systems, and teams. One ofour major focuses has been the global integration of the
CMC Materials and Entegris EHS programs. This ambitious
endeavor has demanded considerable dedication andresources as we promote safety across our expanded
global footprint and seek to capture best practices fromboth companies.
Our efforts in enhancing our safety practices have yielded
meaningful results, including the successful redeploymentof our Life Saving Rules and Stop Work Authority programsin 2022. As we look to the future and to our 2030
goals, we remain committed to continually improving
and strengthening our EHS programs, while driving
sustainable practices to create a safer, healthier, and moreenvironmentally responsible workplace for all.

ENTEGRIS, INC.

18

PILLAR TWO

SAFETY

Commit to achieving an injuryfree work environment at
Entegris
All recordable injuries occurring
at Entegris facilities throughout
the calendar year factor into our
Total Recordable Incident Rate
(TRIR), which is calculated using
guidelines outlined by the U.S.
Occupational Health and Safety
Administration (OSHA). In 2022,
we produced a TRIR of 0.79, which
unfortunately represents a 54%
increase from 2021. We believethat this increase was driven
primarily by the post-pandemic
return to standard working
schedules and the integrationof CMC Materials into Entegris.
Our safety performance returned
toward historical performancelevels after Day 1 as we continued
with the unification of our EHS
culture and programs. We areconfident that our ongoing
efforts to consolidate our safety
programs, eliminate workplace
hazards, and enhance our safety
culture will produce the improved
safety performance that we arededicated to achieving.

Create a culture where at least
95% of our colleagues agree
that “Entegris is a safe place towork”
Gaining insights into ouremployees’ perceptions ofworkplace safety is a vital aspectof fostering a robust safety culture.
In 2022, 90% of team members
surveyed believed we provide asafe place to work, which is inline with our 2020 baseline. Our
firm belief is that establishinga work environment wherecolleagues feel secure is integral
for them to excel in their roles
and lead fulfilling lives. We believethat the integration of our newcolleagues joining Entegris from
CMC Materials will continue to bea key area of emphasis in 2023
as we work to ensure that all ourteam members have confidence
in our safety programs and ourcommitment to provide a safe
place to work.

Achieve 100% participation ratein proactive safety activities at
operating locations
The active involvement ofour colleagues is essential inenhancing the safety of ouroperations. We encourage
everyone across our global
facilities to proactively reportany observed hazards and otheropportunities for improvement,
enabling us to take corrective
action and prevent injuries
effectively. This includes reporting
observations of unsafe conditions,actively engaging in safety
inspections, and participating inincident investigations, among
other activities.
In 2022, 67% of our employees
participated in at least one
proactive safety activity per month,representing an approximately
21% increase in engagementfrom 2021. This demonstrates ourteam members’ growing personalcommitment and involvement increating a safe work environment
for themselves and their fellow
Entegris colleagues.

Moving Forward – 2030 Safety Pillar Goals• Commit to achieving an injury-free work environment at Entegris• Create a culture where at least 95% of our colleagues agree that “Entegris is a safe place to work“• Achieve 100% participation rate in proactive safety activities at operating locations

We work continually to enhance workplace safety and eliminate hazards by emphasizing job safety
analyses, process safety hazard assessment techniques, and ergonomic assessments. We conductindustrial hygiene surveys to minimize or eliminate team member exposure to hazardous agents,
and we regularly assess our workplaces with active team member and management participation.
Additionally, we collaborate with external health and safety experts to conduct recurring audits, whichhelps us to ensure compliance with applicable regulations and to implement industry best practices.
Data for safety figures reflect impact from acquisition of CMC Materials. Figures reflect Entegris from January 1, 2022 – July 5, 2022, and include
CMC Materials starting from July 6, 2022.

ENTEGRIS, INC.

19

PILLAR TWO

SAFETYLEADING ON ERGONOMIC
SAFETY

LIFE SAVING RULES

Throughout 2022, we took significant steps
to enhance workplace safety by providing
comprehensive training to our supervisors andteam members. The focus of our safety training
was to enable our team members to identify,
assess, and effectively mitigate workplace activities
and conditions that could lead to musculoskeletal(ergonomic) injuries.

The Life Saving Rules (LSR) and Stop Work Authority(SWA) initiatives assume a foundational role within
our global EHS program. This program, which wasformed by combining existing programs from CMC
Materials and Entegris, emphasizes awarenessof, and protection from, the most critical safety
hazards that our team members face. Violating oneof these protocols could lead to significant injury.
The LSR portion of the program identifies specificscenarios that constitute an LSR violation, along withcomprehensive procedures for investigating andresolving such events.

In Q4 2022, our Munmak manufacturing plantin Korea was honored with the Excellence for
Ergonomic Work Improvement Award by the
Ergonomics Society of Korea. This achievement
in injury prevention demonstrates our unwaveringcommitment to creating a safe and healthy work
environment for all our employees.

Most companies have some manner of authority
about when a team member may call for a work
stoppage due to an unsafe condition; however,many companies do not have a clear process
to accomplish this. To assist our team memberswith these situations, Entegris also establishedspecific procedures to educate and empower ourworkforce with SWA, a mechanism enabling our
employees to suspend work tasks if they identify
a safety hazard jeopardizing their own or others’
well-being. This principle clearly explains thesystematic execution of SWA, which includes clear
and specific steps to 1) identify an unsafe condition,2) stop work, 3) eliminate or mitigate the hazard,4) confirm safe conditions with coworkers, and 5)
safely return to work.

ENTEGRIS, INC.

PILLAR TWO

SAFETY

20

SAFESTART® PILOTThe SafeStart® program, originally initiated at CMC
Materials more than 15 years ago, is expanding
broadly throughout Entegris. The principle of the
SafeStart program is simple: Most injuries arise fromfour critical errors — eyes not on the task, mind not
on task, placing oneself in the “line of fire,” and lossof balance, grip, or traction. These errors often stemfrom four specific states of mind that frequently leadto one of these critical errors: complacency, fatigue,
frustration, and rushing.
SafeStart’s primary aim is to enhance awarenessof these states of mind, prompting individuals tobriefly pause, reassess their actions, refocus on
their circumstances, and prevent critical errors. The
applicability of this principle extends beyond theworkplace, making it pertinent to personal life too.
It is also a shareable concept, fostering a culture ofsafety with family and friends.
The SafeStart program began at CMC Materials in
2007, and recordable injuries dropped substantiallywithin the first full year of implementation. Even
now, the SafeStart principles and terminology remain
key fixtures within those former CMC Materials
facilities. We now look forward to sharing thosesame benefits with the larger Entegris family, having
begun our journey in 2022 with a pilot program atseven Entegris facilities that will train around 850
people. The early reports are strongly positive, and
we look forward to completing the pilot programand expanding the SafeStart program to otherlocations throughout 2023.

ENTEGRIS, INC.

21

PILLAR TWO

SAFETYLOOKING AHEAD
As we look to the future, we remain committed tocontinually improving and strengthening our EHS programs,
while driving sustainable practices to create a safer, healthier,and more environmentally responsible workplace for all.
In 2023, we will be focused on the following areas:•

The SafeStart pilot program
will be completed in 2023
and expanded to other key
manufacturing locations.

•

We are developing andimplementing consolidated
and enhanced EHS programs,
including Incident Managementand EHS Leadership, which(along with LSR/SWA) arepart of our Safety Program
foundation.

•

We continue the development
and enhancement of ourglobal Process Safety Program,including identification andimplementation of bestpractices consistently acrossour global operating divisions.

•

We will maintain ourcommitment to EHS
management systems
through maintaining andexpanding ISO14001/ISO45001
certifications at our factories.
Entegris has EHS ISO certified•

The launch of Safety
Commitment Days, which
enhance culture development
and are celebrations ofsafety culture at our global
manufacturing locations during
the summer months.

23 of our primary factories
from the 33 total (70%), andwe will continue exploring
opportunities to qualify
additional facilities under thesebenchmark EHS management
standards.

ENTEGRIS, INC.

22

PILLAR THREEPERSONAL
DEVELOPMENT
AND INCLUSION
At Entegris, we are committed to fostering the growth and successof our teams through our Personal Development and Inclusion(PD&I) efforts. Our progress toward our 2030 milestones focuseson providing a safe and inclusive environment where our teammembers can thrive and succeed.
We support and nurture diverse perspectives and backgrounds
within our organization, enriching our global work environmentand benefiting the entire Entegris community. We are actively
investing in rotational talent development programs while
facilitating team members’ access to ongoing learning andtechnical and leadership training initiatives. This approachempowers our team members to address and find practicalsolutions to challenges we may encounter. As part of ourcommitment to supporting growth opportunities, both internallyand externally, we remain steadfast in expanding our growing
scholarship and internship opportunities for underrepresented
communities in STEM (Science, Tech, Engineering, Math)education and careers.
At the core of our organizational ethos lies our value-centricculture, anchored by our PACE Values framework, which
underscores the significance of People and Teamwork;
Accountability, Integrity and Trust; Creativity and Innovation; andDedication to Excellence. Through continuous improvements to
our inclusive workplace, we aim to foster an environment where
every individual has equal opportunities to thrive and succeed.

U N I T E D N AT I O N S
S U S TA I N A B L E
DEVELOPMENTGOALS

ENTEGRIS, INC.

23

PILLAR THREEPERSONAL DEVELOPMENT AND INCLUSIONPROGRESS TOWARD
OUR 2030 PERSONALDEVELOPMENT AND
INCLUSION GOALS
We actively work toward fostering an inclusive workplace andtalent pool that embraces diversity which is reflected in our 2030
goals. It remains crucial for our organization to invest in thegrowth of our team members so that their unique talents andperspectives are harnessed to drive innovation and excellence.

UPDATED: Aim to fill more than
50% of new engineering rolesand 40% of all leadership roles
with women and/or individuals
from underrepresented groups.
At Entegris, our ongoingcommitment to diversity andinclusion revolves aroundproviding accessible career
opportunities at all levels. In 2022,
39% of new engineering role hires
were filled by women and/or
individuals from underrepresented
groups. Starting in 2023 and going
forward, we have updated this goal
to include achieving 40% diversity
among our leadership roles withwomen and underrepresented
community members. Additionally,
we will no longer have aformalized Corporate Social
Responsibility (CSR) 2030 goal
for board diversity as we have inthe past. We will continue to
strive for increased gender andethnic diversity on our board of
directors as part of our board
refreshment process.

UPDATED: Invest more than $35 million in STEM scholarships
and engineering internships for women and individuals fromunderrepresented communities.

Entegris and the Entegris
Foundation annually provide
scholarship funding to selectcolleges and universities locatedin the U.S., Taiwan, Korea, andJapan for STEM students fromunderrepresented and low-income
communities to provide accessto quality education. In 2022, theEntegris Foundation granted 16
scholarships worth $25,000 USD
each to students in the U.S., aswell as 10 scholarships of $5,000
USD each in Taiwan. In boththese countries, the scholarshipamount has experienced a 100%
increase since 2021, effectively
doubling the support provided.
Additionally, Entegris granted fivescholarships of $5,000 USD in
both Korea and Japan for a totalof 10 scholarships. This long-term
investment aims to foster a morediverse talent pipeline for STEM
leaders to Entegris, while also

contributing to poverty reduction,
facilitating pathways for genderequality, reducing inequalities,
and promoting peace and justice.
In the future, we are looking
to expand these scholarshipprograms into more countries.
Given increased financial support,
we revised our goal from $30
million to up to $35 million
going forward. We increased ourinvestment to ensure we achieve
our objective of doubling ourintern/co-op participant countand enhancing accessibility toscholarships. In 2022, Entegris
and the Entegris Foundation
invested $3.4 million inscholarships and internship, co-op,
and rotational programs.

ENTEGRIS, INC.

PILLAR THREEPERSONAL DEVELOPMENT AND INCLUSION

Increase participation in realtime learning opportunities
and internal training hours bymore than five times the hours
completed in 2020.

NEW: Formalize careerdevelopment plans for all
employees, including anannual average of 80 hours oflearning per employee.

In 2022, we increased the totalof completed training hours
to 215,567, representing nearly
30.5 hours per team member,on average. Our comprehensive
training programs encompass
individual and technical skills
development and leadershipdevelopment. We believethat investing in the careerdevelopment of our teammembers empowers them totackle the ever-evolving global
challenges we encounter today
and enables our company tocontinue to thrive.

Going forward, we are modifying
our goal to increase participationin real-time learning and internal
training hours by more than
five times the new goal statedabove. We feel formalizing a goalfor career development plans
will keep us more accountable
for achieving the increased
goal of 80 hours of learning
per employee. These plans will
include individualized growthstrategies centered on employee’s
development areas. Subsequently,
this process will result in
identifying a suitable plan ofaction to prepare and support ouremployees for success.

24

Moving Forward – 2030 Personal Development and Inclusion Pillar Goals• Aim to fill more than 50% of new engineering roles and 40% of all leadership roles with women and/or individuals from underrepresented groups• Invest more than $35 million in STEM scholarships and engineering internships for women andindividuals from underrepresented groups• Formalize career development plans for all employees, including an annual average of 80 hours oflearning per employee locations
Through the strides we have made with our 2030 PD&I goals, we are working toward narrowing
the gap and reducing inequalities. Notably, our scholarships have played a crucial role in providing
quality education to economically disadvantaged students who are often underrepresented in STEM
education and careers. Entegris also maintains a strong commitment to fair and non-discriminatory
hiring practices, emphasizing inclusivity throughout the recruitment of new talent, be it interns, coops, or full-time employees.
Data for new engineering & leadership hires and internal training hours are for Entegris only-does not include the impact from the acquisition of
CMC Materials in 2022.

ENTEGRIS, INC.

25

PILLAR THREEPERSONAL DEVELOPMENT AND INCLUSIONSPOTLIGHT ON THE ENTEGRISFOUNDATION SCHOLARSThe Entegris Foundation is a scholarship initiative aimed at nurturing
the growth of prospective STEM trailblazers. Our objective is to fostera talent pipeline of young leaders in the industry, while providing themwith the resources they need to maximize their capabilities.

Gabriela Rivas

Hser Htee

Texas A&M University

University of
Minnesota, Twin Cities

MAJOR

Industrial Engineering

MAJOR

Biology and French
MINOR

Business

MINOR

Public HealthGabriela began to pursue a career in STEM
because of her passion for problem-solving anddriving positive change. At Texas A&M, Gabriela
actively participates in the Society of Hispanic
Professional Engineers, taking on leadership roles
in committees such as treasurer and secretary.
She also plays a vital role in enhancing theorganization’s social aspects through the Internal
Affairs committee.
For Gabriela, the Entegris STEM Scholarship has
been a game-changer, relieving financial pressureand enabling her to wholeheartedly pursue herstudies and career aspirations. Gabriela says,“I am now able to have all my attention on mystudies and career goals due to this incredible
opportunity.” This scholarship not only provides
financial support but also mentorship and a
supportive community, empowering Gabriela
to excel and give back to her family, who havealways been her source of motivation.

Hser’s STEM journey began with a desire to
explore diverse STEM avenues, including
medical and technology. Beyond her academic
pursuits, she is actively engaged in campus life,
participating in various student groups, andserving as the president of the K’nyaw Student
Club, where she advocates and promotes
inclusivity. Hser’s leadership journey has
empowered her to break out of her comfort zone
and create lasting memories.
As a first-generation college student, Hser values
the transformative impact of scholarships. Hsersays the Entegris scholarship “has been a blessing”
and has not only helped ease the financial burden
on her family but encouraged her to follow her
dreams in the world of STEM.

ENTEGRIS, INC.

26

PILLAR THREEPERSONAL DEVELOPMENT AND INCLUSIONFOSTERING CONNECTION
THROUGH EMPLOYEENETWORKSEXPANDING LEADERSHIPDEVELOPMENT ACROSSENTEGRIS

In 2022, we expanded our global Employee
Networks to include specialized groups for teammembers of color and those with a strong interestin sustainability issues. We have establishedleadership teams for each of our six Employee
Networks, offering opportunities for colleagues
across all organizational levels to connect globallywith our executives.

The Operations Leadership Development Program(OLDP) began in 2022 and is a 27-month program,with the goal of increasing the pipeline of future
Entegris front-line operations leaders. The teammembers in the program are primarily internal
employees with 3–5 years of experience and an
operations or engineering background.

Our networks include Cross-Generations, Women,
LGBTQ+, Veterans, Employees of Color, andSustainability. These Employee Networks further
enhance our efforts to foster a more inclusive anddiverse workplace.
These Employee Networks are also extending theirsupport to local communities, as we continue
our commitment to diversify the STEM field
through volunteerism, mentoring, and community
engagement programs.

The program has three distinct assignments, allof which are nine months in length. Throughout
these rotations, the participants have an opportunity
to develop their technical skills and also receive
developmental soft-skill workshops and learn fromeach other through monthly meetings. Feedback
from team members in the OLDP is strong, and they
appreciate doing similar work across different sites
to help share best practices among themselves.
The OLDP grew by 100% and incorporated two
additional sites for our April 2023 hiring class. We
eagerly anticipate the expansion of our programs toadditional sites in North America and Asia in 2023
and beyond.

ENTEGRIS, INC.

PILLAR THREEPERSONAL DEVELOPMENT AND INCLUSION

27

DEVELOPING THE LEADERS
OF TOMORROWThe Entegris Leadership Development Program(ELDP) began in 2018 and is a three-year
development program, with the goal of increasing
the pipeline of future Entegris technical leaders.
The team members within the program are recent
college graduates with an engineering or supply
chain background, some of whom have worked with
us previously as a co-op or intern.
The program has two tracks: global supply chain
and engineering, with three distinct one-year
assignments with specific areas of focus basedon the track. This program’s goal is to give ourparticipants an opportunity to develop technicalskills while working through a curated development
curriculum to become future organization leaders.
The participants also gain a valuable network
throughout their time in the program based on
their various rotations and connections they
have made across the program. Feedback fromteam members in the ELDP is strong. Participants
appreciate the day-to-day work and unique projects
they receive which help them understand the fullscope of the role of a typical team member in theirgiven assignment.
The ELDP grew by 33% (compared to 2022) andincorporated two additional sites for our June 2023
hiring class. We are excited about expanding ourprograms to additional sites in North America andAsia in 2023 and beyond.

ENTEGRIS, INC.

28

PILLAR THREEPERSONAL DEVELOPMENT AND INCLUSIONLOOKING AHEAD
As we advance further toward achieving our personal
development and inclusion goals, the following initiatives will
be prioritized in the upcoming year.

•

Broadening the scope of
our STEM scholarships
to encompass additional
universities in both the U.S. andAsia, with a particular emphasis
on reaching communities
that have historically been
underrepresented in thestudent population.

•

Expanding our Employee
Networks at a global scale toprovide our team memberswith opportunities to develop
professional networks andconnections across borders,fostering a more diverse andinclusive work environment.

•

Launching a mentorshipprogram with our Employee
Networks to strengthen
mentorship opportunities
for underrepresented
communities and contributeto the diversification of ourtalent pipeline.

ENTEGRIS, INC.

29

PILLAR FOURSUSTAINABILITY
At Entegris, we fully embrace our responsibility to incorporate
environmental sustainability and resource stewardshipthroughout our business practices. This extends to the design anddevelopment of our products as well. We aim to inspire enthusiasm
among our team members and customers to develop programs
that influence the full lifecycle of our products and services. As
part of advancing our corporate responsibility strategy and 2030
sustainability goals, we have set our aspirations higher for reducing
our impact on the environment with new goals for greenhouse gas(GHG) emissions reductions, water usage, and waste.

U N I T E D N AT I O N S
S U S TA I N A B L E
DEVELOPMENTGOALS

ENTEGRIS, INC.

30

PILLAR FOURSUSTAINABILITYPROGRESS TOWARD OUR
2030 SUSTAINABILITYGOALS BY REDUCINGOUR ENVIRONMENTAL
FOOTPRINT
The approach we take begins with optimizing the use of energy,
water, and raw materials in our manufacturing facilities andprocesses, while reducing GHG emissions and minimizing
waste to lessen our environmental footprint. Our customers
and stakeholders share similar values on sustainable operating
practices and Entegris is committed to supporting these sharedenvironmental goals.

Climate2020

Scope 130,855 mtCO2e

Scope 2

2021

Entegris recognizes climatechange as a critical issue, given
our global business. We have set a
goal to reduce absolute Scope 1
and Scope 2 GHG emissions. To
reach this goal, we have begun
the process of developing anemissions reduction roadmap.

GHG Emissions (Scope 1 and 2)*:

Scope 1

85,838 mtCO2e

23,756 mtCO2e

Scope 22022

NEW: Reduce absolute GHG
emissions by 42% from the2020 baseline.

Scope 197,009 mtCO2e

23,210 mtCO2e

Scope 2

93,813 mtCO2e*Data for Entegris only - does not include the impact from the acquisition of CMC Materials in 2022

ENTEGRIS, INC.

31

PILLAR FOURSUSTAINABILITY

How We Are Getting There
We are establishing a roadmap
for reducing our GHG emissions
from the established baseline of2020. To achieve this, we haveundertaken a detailed analysis of
our GHG sources of emissions andimplemented a system to track
our global GHG inventory. The
data to support the progress andoutcomes of the Sustainability
Program will be managed inaccordance with the World
Resources Institute Greenhouse
Gas Protocol.
Key actions to achieve our 2030
goal include:• Increase energy efficiency
and reduce our energy
consumption to limit the impactof our operations on
the environment.
• Source an increasing amount ofelectricity from renewable, no/low carbon sources.

• Begin assessment with ourinternal operations teams toidentify, eliminate, and control
GHG fugitive emissions.

As part of efforts to define ourinventory, we have identified thefollowing emissions reduction
areas:• Create an equipment
replacement roadmap toelectrify fuel-based equipment/
processes and to replace older
equipment with newer, more
efficient models.

1. Power: Purchase of electricity
in our operations.

• Partner with others in our
industry to improve theavailability of lower carbon
options.
• Continue to publish our GHG
Scope 1 and Scope 2 metrics
and our progress toward ourgoals annually.
• Begin work to define and verify
Entegris Scope 3 emissions.

2. Heat and Steam: Emissions
resulting from the combustionof fuels in stationary sources,
e.g., boilers, furnaces,
and turbines.
3. Physical or Chemical
Processing: Emissions resulting
from the manufacture orprocessing of chemicals andmaterials and waste processing.
4. Transportation of materials,
products, and team members:
Emissions resulting from fuelsin company-owned/controlled
mobile combustion sources(e.g., trucks, trains, ships,
airplanes, buses, and cars).
5. Fugitive emissions: Theseemissions result from
intentional or unintentional
releases, e.g., equipment leaks
from joints, seals, packing, andgaskets; hydrofluorocarbon(HFC) emissions during theuse of refrigeration and air
conditioning equipment.

Looking Ahead for Climate• We will report on our new 2030 GHG emissions targets in our 2023 CSR Report, published in 2024. This work
will also encompass developing our GHG reduction plan and assessing our data to establish a plan that we
expect to submit to the Science Based Targets initiative (SBTi) for review and approval.

ENTEGRIS, INC.

32

PILLAR FOURSUSTAINABILITY

EnergyAchieve 100% electricity
consumption generated fromrenewable sources, whereavailable.
While we are always looking
to evolve our goals, we areproud of the work we haveaccomplished. Last year, we
successfully developed andimplemented a renewable supply
plan to facilitate the conversionof our electric power supply torenewable sources. This plan
encompasses “green/renewable”
electricity supply contracts and selfgeneration of renewable energy
electric power. We will continue totarget significantly greater usageof renewable energy and it is an
important driver for us to achieve
our GHG emissions targets.
However, a renewable energy
target will not be included in 2030
goals for the Sustainability pillar.

Reduce energy consumption by more than 20% per Entegris
revenue dollar from the 2020 baseline.
To improve our energy efficiency,
major U.S. and Asia manufacturing
sites completed third-party auditsof facilities to identify energy andwater reduction opportunities.
Project implementation plans
were put into place to initiate theconservation measures identified
in these audits. The scope ofaudits included:• Detailed survey of systems
and operations to supply abreakdown of energy use.
• Identification of feasible
conservation measures foreach system.

• Estimated savings andcosts for identified
conservation methods.
• Prioritized opportunities toimprove operations processes
and lower resource use.
We will continue to target
significantly lower energy
consumption and it is an importantdriver for us to achieve our GHG
emissions targets. However, anenergy reduction target will not
be included in 2030 goals for the
Sustainability pillar.

Energy Metrics*:

2022

2021

2020

Metric Million Btu/$1M
557 Metric Million Btu/$1 million

471 Metric Million Btu/$1 million

405 Metric Million Btu/$1 million% Reduction from 2020

Baseline
15.4%
27.3%

* Data for Entegris only - does not include the impact from the acquisition of CMC Materials in 2022.

ENTEGRIS, INC.

33

PILLAR FOURSUSTAINABILITY

How We Are Getting There
A sample group of recent
initiatives in our facilities to reduce
our energy usage and improve
efficiency are estimated to haveresulted in a reduction of nearly
2,300,000 kWh and an associatedremoval of almost 1,600 metrictons of CO2e* which is theequivalent of 183,411 gallons ofgasoline consumed.
These recent initiatives include:• The installation of highefficiency chillers at two of ourmajor factories with a predictedenergy savings of approximately
1,677,000 kWh a year.
• Improving the air handling
unit heating and cooling valve
controls with an estimatedsavings of approximately
282,000 kWh.
• Multiple locations with lighting
upgrades of approximately
338,000 kWh.

To improve our energy efficiency, facilities have implemented
initiatives focused on conservation and reduction:
Conserving Energy• Improve the insulation of our building envelopes, piping,and equipment to reduce heating and cooling energy
losses.
• Implement an Energy Management System (EMS) tomonitor and control energy usage in real-time.
• Train team members to be more energy conscious.
Encouraging them to turn off lights and equipment when
not in use and to report any energy wastage they observe.
• Conduct compressed air system audits to look forcompressed air leaks or where the pressure can be reduced
to save energy.
• Review the facilities annually for areas where energy is
being used inefficiently or unnecessarily.
Improving Efficiency• Upgrade lighting with energy-efficient LED lighting andinstall motion sensors and timers to ensure that lights are
only on when needed.
• Implement a robust maintenance program to ensure allsystems and equipment are operating at peak efficiency.
• Ongoing replacement of older machinery equipment withnewer, more energy-efficient models as well as regular
maintenance and service of equipment to keep themrunning efficiently.

Looking Ahead for Energy• As part of our plan to transition our energy to renewable sources over the next seven years, we are initiating“green/renewable” electricity supply contracts and installing self-generating renewable electric power
where feasible.
• As we continue to evolve our goals, energy conservation will be an important element of our GHG
reduction plan. Work will be ongoing to lower our energy needs and we will continue to highlight progressthat contributes to these overall efforts.

*Calculations and estimates based on the EPA Greenhouse Gas Equivalences Calculator

ENTEGRIS, INC.

34

PILLAR FOURSUSTAINABILITY

Water Conservation
Decrease water usage
intensity by more than 50%
from the 2020 baseline.

Water Metrics*:
2022 2021 2020

Cubic Meters/$1M

Our sites evaluate the highest-use
areas of water usage and identify ways
to reduce and reclaim water resources.
Our local teams participate in training
on how to identify opportunities atthe local site levels and share bestpractices across sites. This enables
teams to assess if there are similar
opportunities at their sites and takeaction to implement improvements.

% Reduction from 2020

580 cubic meters
578 cubic meters

482 cubic meters

Baseline
.34%
16.9%

* Data for Entegris only - does not include the impact from the acquisition of CMC Materials in 2022.

How We Are Getting There
Increasing the Reclamationof Water
As a company committed toproviding the industry withthe cleanest materials, ourmanufacturing processes require theuse of ultra-pure water. Within ouroperations, we create high-quality
water from local water sources by
operating a reverse osmosis (RO)process. This process delivers thepurity our operations require while
creating a portion of water that is
rejected from use due to a higher
concentration of dissolved solids andminerals. The water that is rejectedby the RO process becomes agood candidate to reclaim for reuseor recycling.
In the right conditions, we canrepurpose it for other operational
needs, such as cooling towers,
landscaping water, and toilets,
effectively reducing our relianceon potable water. In 2022, we
successfully implemented recyclingof the RO system reject water at ourOseong, South Korea; Burnet, Texas;
and Kulim, Malaysia, operations,
resulting in a reduction in sitewater demand. RO reject reclaim
has saved 60,974 m3/year which isthe equivalent of 24 Olympic sizedswimming pools.
Oseong = 1,340 m3/year
Burnet = 45,400 m3/year
Kulim = 14,234 m3/year
Optimizing Water Distribution
Another contribution to our 2022
program goals was the physicalassessment of the city water
distribution system that provides
potable water to our Kulim, Malaysia,
facility. The project identified
multiple leaks in the city equipmentthat we worked to correct and with
the improvements we expect to save
73,272 m3 per year.

Looking Ahead for Water Conservation• We plan to extend the reclaim and recycling of RO reject water at more factories. Additionally, our sites willcontinue to identify local and enterprise-wide opportunities for reducing and reclamation to further promotesustainable water usage across our operations.

ENTEGRIS, INC.

35

PILLAR FOURSUSTAINABILITY

Waste and Circular Economy
NEW: Reduce landfill waste bymore than 50% in metric tons
per Entegris revenue dollar.
Entegris is always striving to
improve efficiency, reduce
defects and scrap, and limit
the creation of waste. As wemake efforts to reduce ourenvironmental footprint, weare issuing a challenge to ourteams worldwide to embrace a
new company-wide objective
to reduce our waste-to-landfill
intensity by at least 50% by 2030.

How We Are Getting There
Reducing the impact of waste
involves looking across all thedifferent types of materials that
contribute to waste, including
chemicals. Entegris’ Specialty
Chemicals and Engineered
Materials Division excels in
producing some of the cleanest
chemicals in the world. The
excess materials from theseprocesses are often cleaner than
the raw materials used to makethe final products and present an
excellent opportunity for recycling
and re-use.

We have implemented a program
to reclaim, analyze, requalify,
purify, redistill, and resell thesescrap or surplus high-purity
chemicals and are exploring
secondary markets for off-specmaterials starting with three of
our CVD products and aspiring to
expand to additional products. Our
reclaim/recycle program in 2022
diverted over 25 tons of material
from waste.

Looking Ahead for Waste and Circular Economy• Going forward, we will track and report waste-to-landfill quantities so that we can report and track progress
to our corporate waste reduction goal. To expand the current recycling efforts, we are establishing a baseline
for recycling capabilities at all facilities and identifying recycling services at all locations. Additionally, we haveset a company goal to establish an end-of-use, circular strategy for our major product platforms which you
can read more about in the Innovation section of our report.
• With the establishment of a formal waste reduction goal, we are working to improve the management ofwaste streams and accounting of our efforts to drive reductions at every operation. Last year, we reported
that Yonezawa, Japan, achieved a Zero Waste to Landfill status, and it is our plan to improve the managementof waste across our portfolio and report additional Entegris facilities that achieve this status.

Moving Forward – 2030 Sustainability Pillar Goals• Reduce Absolute Greenhouse Gas Emissions (Scope 1 and 2) by 42%• Decrease water usage per Entegris revenue dollar by more than 50%• Reduce landfill waste by more than 50% in metric tons per Entegris revenue dollar

ENTEGRIS, INC.

SUPPLY CHAIN

36

SUPPLY CHAIN
At Entegris, our vision for a brighter future drives us to unite with
innovative ideas, seamlessly executing them throughout our
entire operations, including the supply chain. We recognize thesignificance of strong partnerships with our suppliers as a key enablerin overcoming challenges related to sustainability, inclusivity, andregulatory complexity. This approach empowers us to deliver impactful
solutions that benefit all stakeholders involved.

ENTEGRIS, INC.

37

SUPPLY CHAIN

PROGRESSTOWARD
SUPPLY CHAINSUSTAINABILITYRESPONSIBLE
BUSINESSALLIANCE

During 2022, our dedicated efforts in the Supply Chain Sustainability
Program led to notable advancements in key metrics. This resulted in a
substantial improvement in our EcoVadis Supply Chain score, moving
Entegris to the 97th percentile at Gold status. The EcoVadis scoreserves as a comprehensive measure of our sustainability management
system’s effectiveness. This progress highlights our commitment tocontinuously enhancing sustainability practices within our supply chain
and further solidifies our position as a responsible and environmentallyconscious company.

In 2017, Entegris conducted our first external Validated Audit of our Social
Accountability Management System at our Kulim, Malaysia, facility, and wehave continued since then to strengthen the programs and conformancewith the Responsible Business Alliance (RBA) Code of Conduct Standard.
Currently, all Entegris facilities have an annual RBA Self-Assessment
Questionnaire available with RBA-Online, indicating our operations are all
low-risk. In addition, Entegris has four factories with a 200/200 Platinum
score on the RBA VAP and a 5th facility in process.
Our work to maintain RBA conformance within our operations and our
Global Supply Chain involves:• We have cascaded the RBA Code of Conduct as our Supply Chain Codeof Conduct and have asked suppliers to acknowledge the importanceof this standard and their continued support.
• We conduct annual EHS and Sustainability management systemreviews, training on the RBA Code priorities, facility, and supply chain
risk assessments, and set annual company goals for improvement.
• We have implemented robust recruiting and hiring processes thatprevent forced or bonded employment across our organizations andsupply chain partners.
• We maintain a monitoring system for employee work hours to ensure
employees have a safe and healthy work schedule that supports
conformance of RBA.
• We conduct ongoing assessments of our operations and our Tier 1
Suppliers to validate that programs and procedures are working as
intended and to identify areas of opportunity.
• With a global management system implemented for employee
reporting, record retention, documentation, and corrective action
management, we have a process to drive continuous improvement.
Our work to support RBA extends beyond Entegris operations and is an
important part of our global supply chain management. Embedded in our
supplier selection and qualification process we consistently communicate
our CSR expectations, provide ongoing education on emerging CSR
requirements, and ask for their commitment to conformance with the RBA
Code and Sustainable Materials selection.

ENTEGRIS, INC.

38

SUPPLY CHAINRESPONSIBLY
SOURCING
MINERALS

Since the inception of the U.S. Securities and Exchange Commission (SEC)
conflict minerals rule, Entegris has actively supported the Responsible
Minerals Initiative (RMI) and is committed to responsibly sourcing “conflictminerals” across our supply chain, adhering to SEC rules and regulations.
To identify and mitigate risks, we have ongoing programs to assess
existing and new material suppliers. The Global Procurement and ProductStewardship teams work year after year to verify the sourcing of minerals
that may come from conflict regions and ensure they are not mined withforced or bonded labor. The work to integrate Entegris and CMC Materials
expanded the program to the full combined supply chain.
We have witnessed a steady increase in supplier response rate for ourconflict minerals program, reaching 91% in the 2022 reporting year. By
upholding our commitments to responsible sourcing and excellence, we
strive to contribute positively to our industry and the global community.
See our 2022 Conflict Minerals Report.

ENHANCING
SUPPLY CHAIN
INITIATIVESIn July 2022, Entegris and CMC Materials came together, leading toa reorganization of the Supply Chain to effectively support the newly
expanded company. As a result, we established a Procurement Center of
Excellence with a dedicated pillar focusing on Supply Chain Sustainability.
By integrating the best practices from both heritage companies, we laid
the groundwork for enhancing Supply Chain Sustainability initiatives
and fostering strong partnerships with our extended supplier pool. This
strategic move strengthens our commitment to responsible sourcing,environmental stewardship, and driving positive impacts throughout our
supply chain network.
Throughout 2023, we are working to integrate CMC Materials
suppliers into Entegris programs, including the RBA Code of Conductacknowledgment and the Diverse Spend program.

RECOGNIZINGSUPPLIERS
DRIVING POSITIVE
IMPACT

Annually, we honor a supplier that embodies the qualities we value in ourpartnership. In the 2022 Supplier Partnership Program event, we proudly
bestowed the Entegris Sustainability award to Everlight Chemical based in
Taiwan. ECIC is a leader in Sustainability and recently achieved a high RBA(Responsible Business Alliance) score demonstrating their performance.
The Supplier Partnership Program event served as an opportunity to
not only recognize outstanding efforts but also to share our vision
for a sustainable supply chain with all our Tier 1 Suppliers. To ensure
widespread accessibility, the event recording is available on our Supplier
Portal, enabling all suppliers to benefit from this valuable content. Ourcommitment to sustainability and strong partnerships continues to drive
positive change throughout our supply chain.

ENTEGRIS, INC.

39

SUPPLY CHAINLOOKING AHEAD
As we progress in our journey to enhance the sustainability
and diversity of our supply chain, the following programs willbe among our top priorities for the upcoming year.

•

Working toward achieving
a 92% response rate for the
conflict minerals program.

•Enhancing our supplierscorecard with an expanded
Sustainability section,encompassing CMC
Materials suppliers.

•

Expanding our Corporate
Social Responsibility
Expectations with suppliers
within our RFP template toconsider an expanded scopeof sustainability initiatives withinitial vendor selection.

Beginning the journey to define
our Scope 3 greenhouse gas(GHG) emissions:•-

Creating a crossfunctionalteam to identify the scope andsources of data that comprise
Scope 3.

-

Collecting and verifying thedata inputs to build thefull picture.

-

Communicating andeducating external parties on
the roadmap to develop the
Entegris Scope 3 program,their role, and participation.

•

Developing a Network
Analysis Dashboard that will
provide information on thetransportation of finishedgoods and raw materials. This
will feed into our overall Scope
3 emissions assessment andhelp guide mode optimization(air shifting to ocean, truck
shifting to rail) where possible.

•

Additionally, we will begin
collecting our suppliers’ Scope
1 and 2 emissions, which
will create awareness in our
Supply Base and help identify
opportunities to improve on
by partnering with suppliers on
GHG reduction projects.

ENTEGRIS, INC.

40

DATA APPENDIXDATA APPENDIX
We remain steadfast in our dedication to accountability andtransparency as we continue to report and assess the impact of
our Corporate Social Responsibility (CSR) program aligned withour 2030 objectives. Below, you’ll find an overview of our 2030
goals across our four CSR Pillars: Innovation, Safety, Personal
Development and Inclusion, and Sustainability. We provide
measurement baselines along with our plans for reporting andmeasurement. Additionally, these charts incorporate Sustainability
Accounting Standards Board (SASB) and The Task Force on
Climate-related Financial Disclosures (TCFD) metrics tailored tothe semiconductor industry, accompanied by relevant data points
wherever feasible.

Entegris Existing 2030 CSR Goals (by Pillar)
PILLAR

2030 GOALS

2020 BASELINE

2021 RESULTS

2022 RESULTSINNOVATION

Invest at least 55% of our operating
expenditures in research anddevelopment (R&D)

35% (non-GAAP)

37% (non-GAAP)

37% (non-GAAP)

Commit 100% of Entegris’
innovation portfolio to advancing
customers’ technology roadmaps

Not evaluated in 2020

Met our target goal ofcommitting 100% of ourinnovation portfolio toadvancing our customers’
tech roadmaps

Maintained 100%

Align 100% of Entegris’ innovation
portfolio to advance the U.N.
SDGs

Not evaluated in 2020100% of our investments
in R&D aligned with atleast one U.N. SDGs

Maintained 100%alignment of ourinvestments in R&D withat least one U.N. SDGs

Strive for an injury-freework environment at all
Entegris facilities

Total Recordable Incident
Rate (TRIR): <0.741

Total Recordable Incident
Rate (TRIR): 0.51

Total Recordable Incident
Rate (TRIR): 0.792

Create an environment wheremore than 95% of colleagues say“Entegris is a safe place to work”

90%

87%

90%

Achieve 100% manufacturing
participation rate in proactive
reporting of safety opportunities

25%

46%

67%

SAFETYENTEGRIS, INC.

41

DATA APPENDIXPILLAR

2030 GOALS

2020 BASELINE

2021 RESULTS

2022 RESULTSPERSONAL
DEVELOPMENT
AND INCLUSION

Invest more than $30 million in STEM
scholarships and engineering internships
for women and individuals fromunderrepresented countries

Scholarships not yet
granted in 20203

Invested $8M in
scholarship, co-op,
and internshipprogram to date

Invested $3M in our
scholarship, co-op, andinternship program. Invested$11M in total to date

Aim to fill more than 50% of newengineering roles with women and/or
individuals from underrepresented groups

39%4, 542%

39%

Aim to achieve 50% diversity amongboard members

13%6

38%

38%

Increase participation in real-timelearning opportunities and internalraining hours by more than five times thehours completed in 2020

109,000 hours4, 7

160,184 hours

215,567 hours

Reduce energy consumption by morethan 20% per Entegris revenue dollars
from 2020 baseline

557 MMBtu/$1
million9471 MMBtu/$1
million, a 15.4%
reduction per
revenue dollar

405 MMBtu/$1 million, a
27.3% reduction per revenue
dollarAchieve 100% electricity consumption
generated from renewable sources,
where available

0% on hand

3%10

1.5% acquired10
1.5% delayed in process

Decrease water consumption by morethan 50% per Entegris revenue dollars
from 2020 baseline

580 m3/$1 million11, 12

578 m3/$1 million
in revenue, a 0.34%
reduction per
revenue dollar12482 m3/$1 million inrevenue, a 16.9% reduction
per revenue dollar

SUSTAINABILITY8

Data in table above summarizes 2030 goals that were first published in 2020.
1

As defined by U.S OSHA recordkeeping rule.

2

Data for safety figures reflect impact from acquisition of CMC Materials. Figures reflect Entegris from January 1, 2022 – July 5, 2022, and include CMC Materials
starting from July 6, 2022.

3

In 2020, we established and began to fund the Entegris Foundation for the STEM scholarships, and as of 2022, we have contributed $11 million to the Foundation.

4

Data for new engineering & leadership roles and internal training hours is for Entegris only- does not include the impact from the acquisition of CMC Materials in
2022.

5

Female and individuals from underrepresented groups hired as engineers globally within one year of their graduation. Underrepresented is based on U.S. designation.

6

Baseline value in 2020 included one female on the board. In 2021, we added two new diverse board members and increased diversity on our board to 38%. In 2023,
our board diversity has increased to 43%.

7

Training hours measured are those delivered for employee development.

8

Sustainability data is for Entegris only - does not include the impact from the acquisition of CMC Materials in 2022.

9

Total of all sources of energy used by manufacturing operations under Entegris control. Includes calculated estimates where some data are not yet readily available.

10 3% renewable energy is contracted. This will differ from the reported value for SASB TC-SC-130a.1 due to usage not reflecting energy consumption in 2021.
11 Total potable water withdrawn from manufacturing operations under Entegris control. Includes calculated estimates where metered values are not yet readily
available.
12 Data collection processes were refined between 2020 and 2021, leading to a revised baseline. Entegris has chosen not to restate the baseline with this report,
therefore the delta between the 2020 baseline and the 2021 result is narrower than what is reflected.

ENTEGRIS, INC.

42

SUSTAINABILITY ACCOUNTING STANDARDS BOARD (SASB)SUSTAINABILITY ACCOUNTINGSTANDARDS BOARD
Our CSR reporting approach is aligned with the guidelines set forth by SASB,
providing the framework for sharing information about our sustainability
initiatives with investors and other stakeholders. These standards pinpoint
the key environmental, social, and governance aspects most relevant to thesemiconductor sector. This facilitates a direct comparison of our performanceagainst peers and the establishment of benchmarks within the industry.

Sustainability Accounting Standards Board (SASB) Standards
SASB TOPICSCODESACCOUNTING METRICS

2020 BASELINE

2022 RESULTS

PAGE REFERENCE

Product
Lifecycle
Management

TC-SC-410a.1

Percentage of
products by revenue
that contain IEC 62474
declarable substances

Not reported

We track all the IEC declarable
substances across 100% of
the materials supplied for our
products and continuously work
to educate the supply chain of
the need to ID and eliminate
these materials from use-

TC-SC-410a.2

Processor energy
efficiency at a systemlevel for: (1) servers, (2)desktops, and (3) laptops

Not applicable

N/A as the metric is targeted
for device manufacturers, notmaterials suppliers-

Materials
Sourcing

TC-SC-440a.1

Description of the
management of risks
associated with the use ofcritical materials

Conflict Minerals
ReportConflict Minerals
PolicySustainable
Sourcing Policy

Entegris has ongoing risk
mitigation programs designed
to assess risk levels ofmaterials suppliers

Page 38

Intellectual
Property
Protection
andCompetitive
Behavior

TC-SC-520a.1

Total amount of monetarylosses because of legal
proceedings associatedwith anti-competitive
behavior regulations

$0

$0

-

Employee
Health and
SafetyTC-SC-320a.1

Description of efforts
to assess, monitor, andreduce exposure of
employees to humanhealth hazards

Read more in Safety
PillarEntegris manages an extensive
and progressive health and safety
program to identify, characterize,
mitigate, and eliminate hazards
throughout our production,
research, and office facilities
worldwide

Page 17

ENTEGRIS, INC.

43

SUSTAINABILITY ACCOUNTING STANDARDS BOARD (SASB)SASB TOPICSCODESACCOUNTING METRICS

2020 BASELINE

2022 RESULTS

PAGE REFERENCE

TC-SC-320a.2

Total amount of monetarylosses because of legal
proceedings associatedwith employee health andsafety violations$0$2,500-

Employee
Engagement,
Diversity, andInclusion

TC-SC-330a.1

Percentage of employeesthat are(1) foreign nationals and(2) located offshore(1) 1.6% foreign
nationals(2) 48% employees
located outside ofNorth America(1) 2.6% foreign national1(2) 47.3% employee locatedoutside of North America1-

Greenhouse
Gas (GHG)
Emissions

TC-SC-110a.1(1) Gross global Scope 1
emissions and,(2) amount of total
emissions fromperfluorinatedcompounds(1) 30,855 mtCO2e 2(Scope 1)(2) Not reported(1) 23,210 mtCO2e (Scope 1);
93,813 mtCO2e (Scope 2)(2) Not reported-

TC-SC-110a.2

Discussion of long-termand short-term strategy
or plan to manage Scope
1 emissions, emissions
reduction targets, and ananalysis of performanceagainst those targets

Read more in
Sustainability pillar

Read more in
Sustainability pillar

Page 30

EnergyManagement

TC-SC-130a.1(1) Total energy
consumed,(2) percentage gridelectricity and,(3) percentage renewable(1) 1,092,708 GJ(2) 64%(3) 0%(1) 1,175,488GJ,(2) 67%(3) 1.5%-

Water and
Wastewater
Management

TC-SC-140a.1(1) Total water withdrawn,(2) total water consumed,
percentage of each inregions with high orextremely high baselinewater stress(1) 1,078,926 m3 3(2) Not reported(1) 1,326,448 m3(2) 8% total water withdrawal-

Waste andHazardous
Materials
Management

TC-SC-150a.1

Amount ofhazardous wastefrom manufacturing;
percentage recycled

3,246 MT;Not reported4

2,633 MT of hazardous waste;
Not reported4-

1 2022 figures for foreign national and employees located outside of North America includes impact from the acquisition of CMC Materials in 2022.
2 Scope 1 calculated for facilities within Entegris operational control using the IPCC Fifth Assessment Report (2014).
3 Total potable water withdrawn from manufacturing operations under Entegris control. Includes calculated estimates where metered values are not yet readily available.
4 We recycle hazardous waste but regional variations in the designation of hazardous materials and how the waste is classified makes it difficult to quantify this activity.

ENTEGRIS, INC.

44

TASK FORCE ON CLIMATE-RELATED FINANCIAL DISCLOSURES (TCFD)TASK FORCE ON CLIMATERELATED FINANCIALDISCLOSURES
TCFD is a voluntary framework designed to encourage disclosureof climate-related risks and opportunities through a corporation’s
existing reporting processes. The below table summarizes how
Entegris’ current public disclosures align with TCFD. Entegris willcontinue to evaluate and evolve these disclosures in line with the
TCFD framework and our strategic goals.

Task Force on Climate-related Financial Disclosures (TCFD)
CORE RECOMMENDATIONSDISCLOSURES

2022 RESPONSES

Governance: Disclose theorganization’s governancearound climate-related risks andopportunities.

a. Describe the board’s oversight of climaterelated risks and opportunities.

2023 Proxy Statement: Pages 10, 21-24,

Strategy: Disclose the actual andpotential impacts of climaterelated risks and opportunities
on the organization’s businesses,
strategy, and financial planningwhere such information is material.

Board of Directors Charter for Environmental,
Health, Safety and Sustainability Committeeb. Describe management’s role in assessing andmanaging climate-related risks and opportunities.

2023 Proxy Statement: Pages 24, 29

a. Describe the climate-related risks andopportunities the organization identified over the
short, medium, and long term.

2022 Form 10-K: Pages 24-25

b. Describe the impact of climate-related risks andopportunities on the organization’s businesses,
strategy, and financial planning.

2022 Form 10-K: Pages 24-25

c. Describe the resilience of the organization’s
strategy, taking into consideration different
climate-related scenarios, including a 2°C or
lower scenario.

Entegris is evaluating methodologies to reportclimate-related scenario planning for our businessin the future.

Innovation Pillar Section

Innovation Pillar Section

ENTEGRIS, INC.

45

TASK FORCE ON CLIMATE-RELATED FINANCIAL DISCLOSURES (TCFD)

CORE RECOMMENDATIONSDISCLOSURES

2022 RESPONSES

Risk Management: Disclose
how the organization identifies,
assesses, and manages climaterelated risks.

a. Describe the organization’s processes for
identifying and assessing climate-related risks.

Our overall approach to risk management is
described in our Proxy Statement and risk factors
are described in our Form 10-K. Additional details
on our climate strategy can be found in our
Corporate Social Responsibility report.

b. Describe the organization’s processes for
managing climate-related risks.
c. Describe how processes for identifying,assessing, and managing climate-related risks
are integrated into the organization’s overallrisk management.

Metrics and Targets: Disclose themetrics and targets used to assess
and manage relevant climaterelated risks and opportunities
where such information is material.

a. Disclose the metrics used by theorganization to assess climate-related risks
and opportunities in line with its strategy andrisk management process.

Sustainability Pillar Section

b. Disclose Scope 1, Scope 2, and if appropriate,
Scope 3 greenhouse gas (GHG) emissions and therelated risks.

Sustainability Pillar Section

c. Describe the targets used by the organization
to manage climate-related risks and opportunities
and performance against targets.

Sustainability Pillar Section

ENTEGRIS, INC.

46

DISCLAIMER AND CAUTIONARY STATEMENTS
Information in this report is provided as of the date of this report and is subject to change without notice. Company
goals are aspirational and not guarantees or promises that all goals will be met. Certain figures relating to Sustainability
and Corporate Responsibility matters are estimates and may be based on assumptions or developing standards.
This report contains “forward-looking statements.” The words “believe,” “expect,” “anticipate,” “intend,” “estimate,”“forecast,” “project,” “should,” “may,” “will,” “would” or the negative thereof and similar expressions are intended to
identify such forward-looking statements. These statements include those related to Entegris’ 2030 CSR goals, plansto achieve such goals and reporting related thereto; the focus of Entegris’ engineering, research, and development
projects; Entegris’ ability to execute on its business strategies, including with respect to Entegris’ expansion of its
presence globally; and other matters. Forward-looking statements address matters that are, to varying degrees,
uncertain and subject to risks, uncertainties, and assumptions, many of which that are beyond Entegris’ control, that
could cause actual results to differ materially from those expressed in any forward-looking statements. These risks
and uncertainties include, but are not limited to, those that are described in Entegris’ filings with the Securities andExchange Commission, including under the heading “Risks Factors” in Item 1A of Entegris’ Annual Report on Form
10-K for the fiscal year ended December 31, 2021, filed with the Securities and Exchange Commission on February
23, 2023, and in Entegris’ other periodic filings. Except as required under the federal securities laws and the rules
and regulations of the Securities and Exchange Commission, Entegris undertakes no obligation to update publicly
any forward-looking statements or information contained herein, which speak as of their respective dates. Forwardlooking statements are not guarantees of future results.
THE USE BY ENTEGRIS OF ANY MSCI ESG RESEARCH LLC OR ITS AFFILIATES (“MSCI”) DATA, AND THE USE OF MSCI LOGOS,
TRADEMARKS, SERVICE MARKS OR INDEX NAMES HEREIN, DO NOT CONSTITUTE A SPONSORSHIP, ENDORSEMENT,RECOMMENDATION, OR PROMOTION OF ENTEGRIS BY MSCI. MSCI SERVICES AND DATA ARE THE PROPERTY OF MSCI OR ITSINFORMATION PROVIDERS AND ARE PROVIDED ‘AS-IS’ AND WITHOUT WARRANTY. MSCI NAMES AND LOGOS ARE TRADEMARKSOR SERVICE MARKS OF MSCI.

ABOUT ENTEGRIS
Entegris is a leading supplier of advanced materials and process solutions for the semiconductor and other high-techindustries. Entegris has approximately 9,000 employees throughout its global operations and is ISO 9001 certified. It
has manufacturing, customer service, and/or research facilities in the United States, Canada, China, Germany, Israel,
Japan, Malaysia, Singapore, South Korea, and Taiwan.
Additional information can be found at www.entegris.com.

Corporate Headquarters
129 Concord Road
Billerica, MA 01821
USA
Entegris®, the Entegris Rings Design®, and other product names are trademarks of Entegris, Inc. as listedon entegris.com/trademarks. All third-party product names, logos, and company names are trademarks
or registered trademarks of their respective owners. Use of them does not imply any affiliation,sponsorship, or endorsement by the trademark owner.
©2023 Entegris, Inc. | All rights reserved. | 9000-13258WEB-1123

www.entegris.com