ISPlasma2023/IC-PLANTS2023 March 5 - 9, 2023 Nagoya, Japan

3/5（SUN）
13:00-14:00<05pA01TU>
Tutorial
Bio Applications
Chair: Yuzuru Ikehara (Chiba University)
Eun Ha Choi
Kwangwoon University"Nonthermal Atmospheric Pressure Plasma Characteristics and International Standards for Plasma Bioscience, Medicine,
Agriculture, and Environmental Sciences"

14:00-14:15 Break
14:15-15:15<05pA02TU>
Tutorial
Nitride Semiconductors
Chair: Koh Matsumoto (Nagoya University)
Hao-Chung Kuo
National Yang Ming Chiao Tung University"Micro-LEDs and Quantum Based-Full Color Devices for Display and Visible Light Communications"

15:15-15:30 Break
15:30-16:30<05pA03TU>
Tutorial
Nanomaterials
Chair: Tetsuhide Shimizu (Tokyo Metropolitan University)
Jon Tomas Gudmundsson
University of Iceland"On Ion Recycling and Electron Heating in High Power Impulse Magnetron Sputtering Discharges"

16:30-16:45 Break
16:45-17:45<05pA04TU>
Tutorial
Plasma Science and Technologies
Chair: Daisuke Ogawa (Chubu University)
Miles Turner
Dublin City University"Hybrid Models"

14

ISPlasma2023/IC-PLANTS2023 March 5 - 9, 2023 Nagoya, Japan

3/6（MON）
10:00-10:10 Opening & Plasma prize ceremony
Chair and Presenter: Takashi Itoh (Gifu University)
10:10-11:10
Plasma prize
Chair: Takashi Itoh (Gifu University)
Alexander Fridman
Drexel University

11:10-12:00<06aA02PL>
Plenary Lecture
Chair: Takashi Itoh (Gifu University)
Shinji Kambara
Gifu University"Plasma Membrane Reactor for Pure Hydrogen Production from Ammonia"

12:00-12:40<06aA03K>
Keynote Lecture 1
Chair: Seiichi Miyazaki (Nagoya University)
Seiichiro Higashi
Hiroshima University"Atmospheric Pressure Thermal Plasma Jet Technology for Semiconductor Device Manufacturing"

12:40-14:00 Break
14:00-14:40<06pA04K>
Keynote Lecture 2
Chair: Koh Matsumoto (Nagoya University)
Motoaki Iwaya
Meijo University"Crystal Growth of High Quality AlGaN Thick Films and UV-B Laser Diodes Fabricated on it"

Plasma Science and Technologies 1
Chair: Moo Been Chang(National Central University)
Room B

Nanomaterials 1
Chair: Junpei Sakurai(Nagoya University)
Takayuki Tokoroyama(Nagoya University)
Room C

15

Nitride Semiconductors 1
Chair: Motoaki Iwaya(Meijo University)
Koh Matsumoto(Nagoya University)
Room DISPlasma2023/IC-PLANTS2023 March 5 - 9, 2023 Nagoya, Japan

15:00-15:30<06pB05I>
Invited Lecture
Remi Dussart
GREMI"Passivation Mechanisms Involved in
Cryo-Etching Processes"

15:00-15:30<06pC05I>
Invited Lecture
Motoyuki Murashima
Tohoku University"New Challenge for Reduction in
Friction of Diamond-Like Carbon
Coatings Using in situ Irradiation ofDielectric Barrier Discharge onto DLC
Surface"

15:00-15:30<06pD05I>
Invited Lecture
Daisuke Iida
King Abdullah University of Science andTechnology (KAUST)"Efficient InGaN-Based Red LEDs andtheir Micro-LEDs"

15:30-15:45 1008
<06pB06O>
Shih-Nan Hsiao
Nagoya University"In Situ Monitoring Surface Structureduring Hydrofluorocarbon Assisted
Atomic Layer Etching of Silicon Nitride
Using CF4/H2 and H2 Plasmas"
Shih-Nan Hsiao, Makoto Sekine andMasaru Hori

15:30-15:45 1168
<06pC06O>
Minh Ngo Quang
Nagoya University"Synthesis and Characteristics ofCarbon Nanowalls by Combining
Different Plasma Methods"
Minh Ngo Quang, Nong Ngo Van,
Osamu Oda and Masaru Hori

15:30-15:45 1186
<06pD06O>
Yi-Xuan Wang
National Chung Hsing University"Characteristic of Micro-Scale UVCLight-Emitting Diodes with PorousAlGaN Structures"
Yi-Xuan Wang, Yu-Cheng Kao andChia-Feng Lin

15:45-16:00 1180
<06pB07O>
Yusuke Izumi
Nagoya University"Self-Limited Fluorination of ElectronBeam-Irradiated GaN Surface"1
Yusuke Izumi, 2Takayoshi Tsutsumi,
2
Kenji Ishikawa, 2Hiroki Kondo,
2
Makoto Sekine and 2Masaru Hori

15:45-16:15<06pC07I>
Invited Lecture
Takayuki Tokoroyama
Nagoya University"The Effect of Graphite Domain
Direction on the Friction Coefficient of
Diamond-Like Carbon Measured via
Polarized Raman Analysis"

15:45-16:00 1134
<06pD07O>
Chia-Yun Lee
National Chung Hsing University"Membrane-Type InGaN ResonantCavity Light-Emitting Diodes"
Chia-Yun Lee and Chia-Feng Lin

Nagoya University

1
2

Nagoya University
Center for Low-temperature Plasma Sciences

Nagoya University

16

National Chung Hsing University

National Chung Hsing University

ISPlasma2023/IC-PLANTS2023 March 5 - 9, 2023 Nagoya, Japan

16:00-16:15 1077
<06pB08O>
Minoru Sasaki
Toyota Technological Institute"Deep Micro-Textured Die Realized by
Mutiple-Patterning and Etching for
Press-Transferring Water-Repellent
Function to the Fin of the Heat
Exchanger"
1
Seiya Fujita, 1Gang Han,
2
Shigenori Saito and 1Minoru Sasaki
1
2

Hitachi High-Tech Corporation
Hitachi, Ltd.
3
Kyushu University
2

Meijo University

Toyota Technological Institute
Aicello Corporation

16:15-16:30 1085
<06pB09O>
Michikazu Morimoto
Hitachi High-Tech Corporation"Effects of Pulsed Microwave ECR
Plasma on Si3N4 Etching"1
Michikazu Morimoto, 2Miyako Matsui,
3
Kazunori Koga and 3Masaharu
Shiratani1

16:00-16:15 1196
<06pD08O>
Kenta Kobayashi
Meijo University"MOVPE-Grown N-Type Conducting
AlInN/GaN DBRs with AlGaN Graded
Layers"
Kenta Kobayashi, Kana Shibata,Tsuyoshi Nagasawa, Ruka Watanabe,
Kodai Usui, Tetsuya Takeuchi,
Satoshi Kamiyama and Motoaki Iwaya

16:15-16:30 1182
16:15-16:30 1212
<06pC08O><06pD09O>
Kenichi Inoue
Ruka Watanabe
The University of Tokyo
Meijo University"Functionalization of Carbon Layer on"A Blue LED with Current Confinement
Hexagonal Boron Nitride Formed by
Formed by Mist Particle Supply
Plasma Processing in Solution"
Oxidation"
1,2
Kenichi Inoue, 1Tsuyohito Ito, 2Yoshiki Ruka Watanabe, Tsuyoshi Nagasawa,
Shimizu and 1,2Kazuo Terashima
Kenta Kobayashi, Mitsuki Yanagawa,1
Tetsuya Takeuchi, Satoshi Kamiyama
The University of Tokyo2
and Motoaki Iwaya
National Institute of Advanced Industrial
Science and Technology (AIST)

16:45-18:15 Presentation 1

17

Meijo University

ISPlasma2023/IC-PLANTS2023 March 5 - 9, 2023 Nagoya, Japan

3/7（TUE）
Plasma Science andNanomaterials 2
Nitride Semiconductors 2
Bio Applications 1
Chair: Tetsuya Yamamoto
Chair: Makoto Miyoshi
Chair: Hiromasa Tanaka
Technologies 2
Chair: Atsushi Ito(Kochi University of Technology)(Nagoya Institute of Technology)(Nagoya University)(National Institute for
Jon Tomas Gudmundsson
Manato Deki
Room E
Fusion Science (NIFS))(University of Iceland)(Nagoya University)
Room B
Room CRoom D
09:30-10:00<07aB01I>
Invited Lecture
Tomoyuki Murakami
Seikei University"Graph-Based Approach to
Chemistry Modelling for LowTemperature Plasma
Science"

09:30-10:00<07aC01I>
Invited Lecture
Tetsuya Yamamoto
Kochi University ofTechnology"Surface Modification of 10nm Thick ZnO Films as
Interface Layers to Tailor theProperties of Al-Doped ZnO
Films and Control of Surface
and Interface Roughness toAchieve High Carrier
Transport Ultra-Thin
W-Doped In2O3 Films"

09:30-10:00
09:30-10:00<07aD01I><07aE01I>
Invited Lecture
Invited Lecture
Hazime Sakakita
Naoteru Shigekawa
Osaka Metropolitan University National Institute of Advanced
Industrial Science and"Direct Wafer Bonding of
Nitride and its Application for Technology (AIST)"Practical Realization ofAdvanced Devices"
Plasma Medical Equipment
Based on International
Standardization"

10:00-10:30
10:00-10:15 1119
<07aB02I><07aC02O>
Pin-Hsuan Chiang
Invited Lecture
National Taiwan University ofCheng-Che Hsu
Science and Technology
National Taiwan University"Machine Learning on Plasma "Microplasma Engineering ofSurface-Functionalized
Spectroscopy for Analytical
Silver-Based Nanoclusters as
Applications."
Multifunctional Probes ofBiomarkers Alzheimer's
Disease and Heavy Metals"
Pin-Hsuan Chiang and WeiHung Chiang

10:00-10:30
10:00-10:15 1027
<07aD02I><07aE02O>
Emiri Yamamoto
Invited Lecture
Chiba University
Atsushi Tanaka"Plasma Treatment Effectively
Nagoya University
Diminished the Accumulation"Laser Slicing of GaN
Substrates and GaN Devices" of Bone Marrow Derived
Cells on Bleeding Control"
1
Emiri Yamamoto, 1Shinsuke
Akita, 1,2Sanae Ikehara, 1Ikumi
Nomata, 1Shigehito Sakai,
1,2
Takashi Yamaguchi, 1Kazuo
Yamamoto, 1Nobuyuki
Mitsukawa and 1,2Yuzuru
IkeharaNational Taiwan University of
Science and Technology

1Chiba University
National Institute of Advanced
Industrial Science and Technology(AIST)
2

10:15-10:30 1045
<07aC03O>
Takeshi Ito
Kansai University"Analysis of FexOy
Nanoparticles Depositted by
Arc Plasma Deposition"
1
Koyo Kawabata, 1Masahiro
Takebayashi, 1Ryosuke
Moriyama, 2Satoru Kaneko,
1
Hitoshi Ishida, 1Tomohiro
Shimizu, 1Shoso Shingubara
and 1Takeshi Ito
1

Kansai University
Kanagawa Institute of Industrial
Science and Technology (KISTEC)
2

18

10:15-10:30 1036
<07aE03O>
Liyin Du
Nagoya University"Investigation of Anti-Tumor
Effect Mechanism by Plasma
Irradiated L-Arginine Solution"
1
Liyin Du, 2Carmelia Miron,1
Saitoshi Kashiwagura,
2
Takashi Kondo, 2Hiromasa
Tanaka, 2Kenji Ishikawa,
1
Masaaki Mizuno, 1Shinya
Toyokuni, 1Hiroaki Kajiyama
and 2Masaru Hori
1

Nagoya University
Center for Low-temperature
Plasma Sciences
2

ISPlasma2023/IC-PLANTS2023 March 5 - 9, 2023 Nagoya, Japan

10:30-10:45 1127
10:30-11:00<07aB03O><07aC04I>
Invited Lecture
Yusuke Ando
Nagoya University
R. Mohan Sankaran"Contribution Analysis ofUniversity of Illinois
Process Parameters in"On Boron-Doped Diamond
Plasma-Enhanced Chemical and the Observation ofVapor Deposition ofIntervalence Plasmons"
Amorphous Carbon"
Yusuke Ando, Jumpei
Kurokawa, Hiroki Kondo,
Takayoshi Tsutsumi, Kenji
Ishikawa, Makoto Sekine andMasaru Hori

10:30-10:45 1053
10:30-10:45 1140
<07aD03O><07aE04O>
Kazuki Sawai
Yuki Kojima
Osaka Metropolitan University Nagoya University"Characterization of GaN/
"Morphological Control of
GaN Interfaces Fabricated by Human Mesenchymal Stem
Surface-Activated Bonding"Cells with Electrical1
Kazuki Sawai, 1,2Jianbo Liang, Stimulation on Carbon
3
Nanowalls."
Yasuo Shimizu, 3Yutaka
Ohno, 3Yasuyoshi Nagai and Yuki Kojima, Hiroki Kondo,
1,2
Naoteru Shigekawa
Masahiro Tanaka, Kenji
1
Osaka City University
Ishikawa, Hiroshi Hashizume
2
Osaka Metropolitan University
and Masaru Hori

10:45-11:00 1148
<07aB04O>
Seiki Saito
Yamagata University"Hydrogen Recycling Modelon Carbon Materials by
Machine Learning Based on
Molecular Dynamics
Simulation"
1
Seiki Saito, 1Masato Iida,
2,3
Hiroaki Nakamura,
3
Kazuki Takasan, 4Keiji
Sawada, 5Kazuo Hoshino,
2
Masahiro Kobayashi and
6
Masahiro Hasuo

10:45-11:00 1059
10:45-11:00 1082
<07aD04O><07aE05O>
Keitaro Toda
Guan-Ying Tasi
Nagoya Institute of Technology National Taiwan University of"Estimation of Electrical
Science and Technology
Characteristics of Gate"Preparation of Functional
Recessed AlGaN/GaN MIS- Collagen Fibril Microislands
HEMTs with Surface
for Control of Cell Phenotype
Treatment"
and Induction of Stem Cell
Differentiation"
Keitaro Toda, Toshiharu
1
Kubo and Takashi Egawa
Guan-Ying Tasi, 2Szu-Yuan
Nagoya Institute of Technology
Chen and 1Meng-Jiy Wang

3

Nagoya University

Tohoku University

Nagoya University

1

National Taiwan University of
Science and Technology
2Institute of Atomic and Molecular
Sciences Academia Sinica

1

Yamagata University
National Institute for Fusion
Science3
Nagoya University
4
Shinsyu University
5
Keio University
6
Kyoto University
2

11:00-11:15 1070
<07aB05O>
Hiroaki Nakamura
National Institute for Fusion
Science"DNA Double Strand Breaks
by Tritium Disintegration
Using Molecular Dynamics
Simulation with Reactive
Force Field"
1,2
Hiroaki Nakamura, 2Kento
Ishiguro, 2Masayuki Murai,
3
Ayako Nakata, 1Shunsuke
Usami, 4Seiki Saito and5Susumu Fujiwara
1

National Institute for Fusion
Science2
Nagoya University
3
National Institute for Materials
Science4
Yamagata University
5
Kyoto Institute of Technology

11:00-11:15 1131
11:00-11:30<07aC05O><07aD03I>
Invited Lecture
Tomonori Kato
Tokyo Metropolitan University Takeyoshi Onuma"Synthesis of Cauliflower-Like Kogakuin University
Carbon Nanoparticles Using "Sub-200 nm Far-UV
High-Power Pulsed Hollow
Emission Characteristics in
Cathode Sputtering in Ne/Ar Rocksalt-Structured MgZnO
Gas Mixture"
Epitaxial Films"
1
Tomonori Kato, 1Ryoichi
Mizue, 1Kei-ichi Takizawa,
1
Kanta Mori, 2Robert Boyd,
2
Sebastian Ekeroth, 1Ming
Yang, 2Ulf Helmersson and1
Tetsuhide Shimizu
1
2

Tokyo Metropolitan University
Linkoping University

19

11:00-11:15 1141
<07aE06O>
Thipwadee Klom-In
National Taiwan University of
Science and Technology"Synergetic Control of Stem
Cell Differentiation by
Extrinsic Photobiomodulation
and Collagen Functionalized
Micropatterns"
1
Thipwadee Klom-In,
2
Szu-Yuan Chen and1
Meng-Jiy Wang
1

National Taiwan University of
Science and Technology
2Institute of Atomic and Molecular
Sciences Academia Sinica

ISPlasma2023/IC-PLANTS2023 March 5 - 9, 2023 Nagoya, Japan

11:15-11:30 1203
<07aB06O>
Yuto Toda
Graduate University for
Advanced Studies"Simulation of Negative
Hydrogen Ion Bombardment
onto Amorphous Carbon"
1
Yuto Toda, 1,2Arimichi
Takayama and 1,2Atsushi M.
Ito

11:15-11:45<07aC06I>
Invited Lecture
Tetsuhide Shimizu
Tokyo Metoropolitan
University"Film Growth-Based Process
Design of HiPIMS Pulse
Parameters"

11:15-11:30 1133
<07aE07O>
Qi-Fu Gao
National Taiwan University of
Science and Technology"Preparation of Sodium
Alginate Tissue Engineering
Scaffolds by 3D Bioprinting
Technology"
1
Qi-Fu Gao, 2Yi-Cheng Liu,
2
Szu-Yuan Chen and 1MengJiy Wang

1

The Graduate University for
Advanced Studies
2
National Institute for Fusion
Science

11:30-11:45 1139
<07aB07O>
Joshua Martin Bumanlag
Ateneo de Manila University"Molecular Dynamics Studyof TiO2 Thin Films
Synthesized by Plasma
Deposition"
Joshua Martin Bumanlag,
Christian Lorenz Mahinay
and Catherine Joy Dela Cruz
Ateneo de Manila University

1

National Taiwan University of
Science and Technology
2Institute of Atomic and Molecular
Sciences Academia Sinica

11:30-11:45 1071
<07aD06O>
Itsuki Umemura
Aichi Institute of Technology"Degradation of
Photoluminescence Intensity
Induced by Mechanical Polishin a GaN Epitaxial Layer"
Itsuki Umemura, Kengo
Sumita, Masahiko Demachi,
Kentaro Osakabe, Hiroyuki
Iwata and Nobuhiko Sawaki
Aichi Institute of Technology

12:00-12:40<07aA08K>
Keynote Lecture 3
Chair: Jun-Seok Oh (Osaka Metropolitan University)
Meng-Jiy Wang
National Taiwan University of Science and Technology"Biocompatible and Anti-Corrosion Thin Films Prepared by Plasma Polymerization"

12:40-14:00 Break20

ISPlasma2023/IC-PLANTS2023 March 5 - 9, 2023 Nagoya, Japan

14:00-14:10 Plasma Materials Science Hall of Fame Prize Award ceremony
Chair: Masafumi Ito (Meijo Univesity)
Presenter: Masaru Hori (Nagoya Univesity)
14:10-14:40
Plasma Materials Science Hall of Fame Prize
Chair: Masafumi Ito (Meijo Univesity)
Gottlieb S. Oehrlein
14:40-15:10
Plasma Materials Science Hall of Fame Prize
Chair: Masafumi Ito (Meijo Univesity)
Masaharu Shiratani

15:30-17:00 Presentation 2

Move to Banquet Venue
Banquet21

ISPlasma2023/IC-PLANTS2023 March 5 - 9, 2023 Nagoya, Japan

3/8（WED）
Plasma Science andTechnologies 3
Chair: Nozomi Takeuchi( Tokyo Institute ofTechnology)
Room B

Nanomaterials 3
Chair: Wipakorn Jevasuwan(NIMS)
Shigeya Naritsuka(Meijo University)
Room C

Nitride Semiconductors 3
Chair: Tsutomu Araki(Ritsumeikan University)
Daichi Imai
(Meijo University)
Room D

10:00-10:15 1033
<08aB02O>
Md Hadi Iskandar Abd Razak
Gifu University"Hydrogen Permeation
Characteristic of Flat Plate
Plasma Membrane Reactor"
Md Hadi Iskandar Abd
Razak, Motoki Tsuda, Yukio
Hayakawa and Shinji
Kambara10:00-10:15 1163
<08aC02O>
Daisuke Ogawa
Chubu University"Effect of Plasma-TreatedMulti-Walled Carbon
Nanotubes on Polyurethane
Composites"
Daisuke Ogawa, Seira
Morimune-Moriya, Hikaru
Fukuda and Keiji Nakamura

10:00-10:30<08aD02I>
Invited Lecture
Masatomo Sumiya
National Institute of Materials
Sceience (NIMS)"Characterization of Wide
Gap Semiconductors by
Photothermal Deflection
Spectroscopy"

9:30-10:00<08aB01I>
Invited Lecture
Moo Been Chang
National Central University"Application of AluminaBased Catalyst for C4F8
Conversion via Plasma
Catalysis"

Gifu University

9:30-10:00
9:30-10:00<08aC01I><08aD01I>
Invited Lecture
Invited Lecture
Masashi Kurosawa
Kentaro Nagamatsu
Nagoya University
Tokushima University"Potential of Silicon"High-Temperature Growth inGermanium-Tin Thin Films for AlN by MOVPE"
Future Thermoelectric Device
Applications"

Chubu University

10:15-10:30 1207
10:15-10:30 1118
<08aB03O><08aC03O>
Naohiro Shimizu
Shintaro Iba
Nagoya University
Nagoya University"Nano-Pulsed Plasma Study "In-Plane Aligned Growth ofof the Wet Electrode Methods Carbon Nanowalls by Ion
on Hydrogen Generation from Irradiation Control"
1High-Resistive Water"
Shintaro Iba, 1Hiroki Kondo,
1
1Kenji Ishikawa, 1Makoto
Naohiro Shimizu, 1Britun
Sekine, 2Mineo Hiramatsu
Nikolay, 1Reiko Tanaka,
1
1
Osamu Oda, 1Ranjit Borude, and Masaru Hori
2
1
Nagoya University
Hiroki Hosoe, 2Satoshi Ino,
2
Yosuke Inoue and 1Masaru 2Meijo University
Hori
1

Nagoya University
Innovative Research Excellence,
Power unit & Energy, Honda R&D
Co. Ltd.
2

22

ISPlasma2023/IC-PLANTS2023 March 5 - 9, 2023 Nagoya, Japan

10:30-10:45 1067
<08aB04O>
Yukio Hayakawa
Gifu University"Verification of H2 Purification
Enhancement Effect of
Zeolite Filled the PMR"
Yukio Hayakawa, Motoki
Tsuda and Shinji Kambara
Gifu University

10:30-11:00
10:30-10:45 1179
<08aC04I><08aD03O>
Invited Lecture
Kouki Noda
Meijo University
Wipakorn Jevasuwan
National Institute for Materials "Analysis of the Sub-Bandgap
Science (NIMS)
Optical Absorption Processes"Silicon-Based Nanostructure in 300 nm-thick Al1-xInxN
Formation and Device
Alloys Grown on a c-Plane
Applications for Photovoltaic GaN/sapphire Template byCells and Field-EffectPhotothermal Deflection
Transistors"
Spectroscopy"
1
Kouki Noda, 1Yuto Murakami,
1
Hayata Toyoda, 1Kazutoshi
Kubo, 1Kyosuke Masaki,
1Daichi Imai, 1Makoto
Miyoshi, 2Makoto Miyoshi,
1
Tetsuya Takeuchi and1
Takao Miyajima
12

10:45-11:00 1096
<08aB05O>
Ahmed Khalil
Kyushu University"Molecular Structure Change
in Phenol by Gas-Liquid
Discharge Plasma"
1,2
Ahmed Khalil, 2Takamasa
Okumura, 2Pankaj Attri,
2
Kunihiro Kamataki,
2,3
Kazunori Koga and2Masaharu Shiratani

10:45-11:00 1227
<08aD04O>
Junya Yoshinaga
Taiyo Nippon Sanso Corporation"Epitaxial Growth for AlGaNBased Deep-Ultraviolet LightEmitting Diodes on 6-inch
Sputter-Annealed AlN
Template by Using a Mass
Production MOCVD System"
1
Junya Yoshinaga, 1Keitaro
Ikejiri, 1Hiroki Tokunaga,
1
Shuichi Koseki, 2Kenjiro
Uesugi and 2Hideto Miyake

1

Aswan University
Kyushu University
3
National Institute of Natural
Sciences2

11:00-11:15 1195
<08aB06O>
Kaishu Nitta
The University of Tokyo"Droplet Evaporation
Behavior in AtmosphericPressure Nonequilibrium
Plasma"1
Kaishu Nitta, 1Hitoshi
Muneoka, 2Yoshiki Shimizu,
3
Hiromichi Kobayashi,
1,2
Kazuo Terashima and1,2
Tsuyohito Ito
112

11:00-11:15 1081
<08aC05O>
Jia-Ming Kuo
National Taiwan University of
Science and Technology"Preparation of Iron CarbideDoped Carbon Composite
Nanoparticles by Argon
Microwave Plasma for
Advanced Oxygen Reduction
Reaction"
Jia-Ming Kuo and Meng-Jiy
Wang

The University of Tokyo
National Taiwan University of
Science and Technology
National Institute of Advanced
Industrial Science and Technology(AIST)
3
Keio University
2

11:15-11:30 1099
11:15-11:30 1095
<08aB07O><08aC06O>
Katsuyuki Takahashi
Shigeru Yamada
Iwate University
Gifu University"Decomposition of Dibutyl"Defect Reduction in Si/SiO2
Phosphate in Alkaline
Multilayer Films by Hydrogen
Solutions by Pulsed Discharge Radical Treatment"over Water Surface for
Shigeru Yamada, Naoki
Nuclear Recycling Process"Matsuo, Tomohiro Deto,
1
Tomoki Fujisawa and
Katsuyuki Takahashi,
1
Takashi Itoh
Tetsu Sakakibara, 1Koichi
Gifu University
Takaki, 2Tatsuya Horimai
and 2Norio Kanehira
1

Iwate University
2
Japan Nuclear Fuel Ltd.

Meijo University
Nagoya Institute of Technology

Taiyo Nippon Sanso Corporation
Mie University

11:00-11:15 1218
<08aD05O>
Arun Kumar Dhasiyan
Nagoya University"Study of the Behavior of
Trimethyl Gallium and Triethyl
Gallium by OES and QMS for
the Growth of GaN by
REMOCVD (RadicalEnhanced Metalorganic
Chemical Vapor Deposition)"
Arun Kumar Dhasiyan,
Swathy Jayaprasad, Frank
Wilson Amalraj, Naohiro
Shimizu, Osamu Oda, Kenji
Ishikawa and Masaru Hori
Nagoya University

11:15-11:30 1123
<08aD06O>
Tsutomu Araki
Ritsumeikan University"Growth of GaN on ScAlMgO4
Substrate by RF-MBE"
1
Tsutomu Araki, 1Naoki Goto,
2
Momoko Deura, 1Yuuya
Kuroda, 1Takashi Fujii,
1
Shinichiro Mouri, 3Yuuji
Shiraishi and 3Tsuguo
Fukuda1

Ritsumeikan University
Ritsumeikan Global Innovation
Research Organization (R-GIRO)
3
Fukuda Crystal Laboratory
2

23

ISPlasma2023/IC-PLANTS2023 March 5 - 9, 2023 Nagoya, Japan

11:30-11:40 Break
Plasma Science andTechnologies 4
Chair: Masanaga Fukasawa( Sony Semiconductor
Solutions Corporation)
Room B

Nanomaterials 4
Chair: Masashi Kurosawa(Nagoya University)
Room C

Nitride Semiconductors 4
Bio Applications 2
Chair: Takuya Maeda
Chair: Minoru Sasaki(The University of Tokyo)( Toyota Technological
Room D
Institute)
Room E

11:40-12:10<08aB08I>
Invited Lecture
Atsushi M. Ito
National Institute for Fusion
Science (NIFS)"Simulation Study ofTungsten Surface Diffusion
Process on Fuzzy
Nanostructures under Helium
Plasma Irradiation."

11:40-12:10<08aC07I>
Invited Lecture
Haruki Kiyama
Kyushu University"High-Fidelity Readout of
Semiconductor Spin Qubits
for Large-Scale Quantum
Computers"

11:40-12:10<08aD07I>
Invited Lecture
Maciej F. Matys
Nagoya University"Design and Fabrication of
Vertical GaN Junction Barrier
Schottky Diodes Using
Selective Ion Implantation
Technology"

11:40-12:10<08aE01I>
Invited Lecture
Yoshihiro Tanaka
Nagoya Institute ofTechnology"Augmentation and Sharingof Tactile Sensations"

12:10-12:25 1003
<08aB09O>
Huang-Chi Su
Ming Chi University ofTechnology"The Fabrication of
Orthorhombic MoOx Cap on
HfxZr1-xO2 Dielectrics by
Plasma-Enhanced Atomic
Layer Deposition"
1
Pi-Chun Juan, 1Huang-Chi
Su, 2Chuan-Hsi Liu and1
Chun-Yao Tou

12:10-12:25 1010
<08aC08O>
Ting Jui Chang
National University of Tainan"Comparison of Electric
Conductive Additives inElectrode Compositions forElectric Double-Layer
Capacitors with Organic
Electrolyte"
Ting Jui Chang and JarrnHorng Lin

12:10-12:25 1187
<08aD08O>
Minagi Miyamoto
Yamaguchi University"Improvement of Electrical
Properties by Improving
Surface Flatness of N-Polar
AlGaN/AlN Hetero Structures
Field Effect Transistor"
1
Minagi Miyamoto, 1Wataru
Matsumura, 1Ryo Okuno,
1
Shunsuke Matsuda, 1Koki
Hanasaku, 1Taketo Kowaki,
1
Daiki Inahara, 2Yongzhao
Yao, 2Yukari Ishikawa
1
Satoru Kurai, 1Narihito
Okada and 1Yoichi Yamada

12:10-12:25 1034
<08aE02O>
Wei-Ting Ting
National Taiwan University of
Science and Technology"Highly Sensitive Molecularly
Imprinted Sensors Based on
Protein Recognition Polyaniline
via Electrosynthesis Imprinting
Method"1
Wei-Ting Ting, 1Meng-Jiy
Wang and 2Matiar M.R.
Howlader1Ming Chi University ofTechnology
2National Taiwan Normal
University

National University of Tainan

1National Taiwan University of
Science and Technology
2
McMaster University

1

Yamaguchi University
Japan Fine Ceramics Center2

12:25-12:40 1004
<08aB10O>
Jun-Yu Su
Ming Chi University ofTechnology"The Effect of Morphological
Change on Thermochromic
Transition by Nitrogen Gas
Added in Reactive HighDensity Plasma for VO2
Devices"1
Pi-Chun Juan, 1Jun-Yu Su,
2
Ding-Yeong Wang and1
Chih-Yi Lin
1

Ming Chi University ofTechnology
2
Feng Chia University

12:25-12:40 1128
12:25-12:40 1052
12:25-12:40 1202
<08aC09O><08aD09O><08aE03O>
Bo Liang Peng
Tomoyuki Kawaide
Yan-Yi Chen
National Cheng Kung University Nagoya Institute of Technology National Taiwan University of"Prospective Research of"Device Characteristics ofScience and Technology
Lithium Phosphorus
Strain-Engineered AlGaInN/ "Bioresource-Derived
Oxynitride (LiPON) as an
GaN HEMTs on SingleNitrogen-Doped Graphene
Artificial SEI, Pseudo/AllSrystal AlN Substrate"
Quantum Dots as
Solid-State Electrolyte on
Tomoyuki Kawaide, Sakura Ultrasensitive and Stable
Silicon Thin-Film Battery"Nanosensors for Cancer andTanaka, Akiyoshi Inoue,
Takashi Egawa and Makoto Neurotransmitter Biomarkers"
Bo Liang Peng and Chuan
MiyoshiPu LiuYan-Yi Chen, Darwin
Nagoya Institute of Technology
National Cheng Kung University
Kurniawan and Wei-Hung
ChiangNational Taiwan University of
Science and Technology

24

ISPlasma2023/IC-PLANTS2023 March 5 - 9, 2023 Nagoya, Japan

12:40-12:55 1097
<08aB11O>
Katsunori Nagahashi
Meijo University"Deposition of Crystalline
Zinc Oxide Film Using HighPower Pulsed Magnetron
Sputtering"
Katsunori Nagahashi and
Takayuki Ohta
Meijo University

12:40-12:55 1200
<08aC10O>
Yi-Jui Yeh
National Taiwan University"Microplasma Engineering of
Photothermal Water
Nanogenerators with Porous
Graphene Quantum DotMXene Nanocomposites"
1
Yi-Jui Yeh, 1,2Wei-Hung
Chiang and 1Kuo-Lun Tung

12:40-12:55 1021
<08aE04O>
Ping-Yen Hsieh
Feng Chia University"Silver Containing Porous
Bioceramic Coating for
Antimicrobial Titanium
Implant"
1
Ping-Yen Hsieh, 1Cih-Wun
Ke, 1Ying-Hung Chen, 2HsiKai Tsou, 3 Hsien-Te Chen
and 1Ju-Liang He

1

National Taiwan University
National Taiwan University of
Science and Technology

1

Feng Chia University
Taichung Veterans General
Hospital
3
China Medical University Hospital2

2

12:40-12:55 1205
<08aE05O>
Ju-Liang He
Feng Chia University"HiPIMS Silver Deposition for
Antibacterial Bone Implant"
1
Shu-Ting Li, 1,2Ning-Chien
Chin, 1Ping-Yen Hsieh, 1YingHung Chen, 3Hsi-Kai Tsouand 1Ju-Liang He
1Feng Chia University
Antai Tian-Sheng Memorial
Hospital
3
Taichung Veterans General
Hospital
2

12:55-14:30 Break

13:10-14:30 Break

14:30-15:10<08pA12K>
Keynote Lecture 4
Chair: Tetsuya Suemitsu (Tohoku University)
Tomas Palacios
Massachusetts Institute of Technology"GaN CMOS, MoS2 Chiplets and other Hardware Accelerators for the Future of Electronics"

15:10-15:40<08pA13I>
Topical Session 1
Chair: Naotaka Iwata (Toyota Technological Institute)
Takuma Nanjo
Mitsubishi Electric Corporation"Demonstration of E-Mode Operation in EID AlGaN/GaN MOS-HEMT"

15:40-16:10<08pA14I>
Topical Session 2
Chair: Naotaka Iwata (Toyota Technological Institute)
Takuya Maeda
The University of Tokyo"ScAlN as a Material to Boost Next-Generation High-Frequency GaN-Based FETs"

16:30-18:00 Presentation 3

25

ISPlasma2023/IC-PLANTS2023 March 5 - 9, 2023 Nagoya, Japan

3/9（THU）
Plasma Science andTechnologies 5
Chair: Remi Dussart(GREMI)
Room B

Nanomaterials 5
Chair: Katsuaki Sugawara(Tohoku University)
Achim von Keudell(Rhur University)
Room C

Bio Applications 3
Chair: Hirofumi Kurita( Toyohashi Universityof Technology)
Room E

9:30-10:00<09aC01I>
Invited Lecture
Achim von Keudell
Ruhr University Bochum"Transport from Target to
Substrate in High Power
Impulse Magnetron
Sputtering Plasmas"

10:00-10:15 1023
<09aC02O>
Fan Xiao
Gifu University"Homogeneous Wettability
Modification of Ultra-Fine
Polyethylene Powders in a
Plasma-Enhanced Spouted
Bed Enriched by Adding
Coarser Particles andVibration"
Fan Xiao, Kobayashi
Nobusuke, Itaya Yoshinori
and Suami Akira
Gifu University

10:15-10:30 1024
<09aC03O>
Ichiro Kato
Nagoya Institute of Technology"Transfer-Free Graphene
Synthesis on Sapphire
Substrates Utilizing theAgglomeration Phenomenonof the Ni Pattern with Fine
Structure"
Ichiro Kato, Toshiharu Kubo,
Makoto Miyoshi and Takashi
Egawa
Nagoya Institute of Technology

26

ISPlasma2023/IC-PLANTS2023 March 5 - 9, 2023 Nagoya, Japan

10:30-10:45 1193
10:30-11:00<09aB01O><09aC04I>
Invited Lecture
Atsumu Matsumoto
Osaka Metropolitan University Katsuaki Sugawara"Influence of Applied Voltage Tohoku University
Polarity on Surface-Launched "High-Resolution ARPES
Plasma Bullets"
Studies of Atomic-Layer
Transition-Metal
Atsumu Matsumoto, Genki
Kawanishi, Koki Sasaki, Jun- Dichalcogenides"
Seok Oh and Tatsuru
Shirafuji

10:30-11:00<09aE01I>
Invited Lecture
Takamasa Okumura
Kyushu University"Impact of Plasma Irradiation
on Plant Seeds Metabolism"

Osaka Metropolitan University

10:45-11:00 1025
<09aB02O>
Nikolay Britun
Center for Low-Temperature
Plasma Sciences, Nagoya
University"Multi-Diagnostic Study ofNanosecond Atmospheric Jet
Discharge"
Nikolay Britun, Peterraj
Dennis Christy, Shih-Nan
Hsiao and Masaru Hori
Center for Low-temperature
Plasma Sciences, Nagoya
University

11:00-11:15 1219
11:00-11:15 1080
<09aB03O><09aC05O>
Noriyasu Ohno
Vikaskumar Gupta
Nagoya University
Nagoya Institute of Technology"Dynamic Response of"Fabrication of NiDetached Recombining
Nanoparticles Dispersed
Plasmas by Applying Electron Carbon Nanocomposite at
Beam"
Room Temperature for High1
Performance Gold BasedNoriyasu Ohno, 1Hideki
Supercapacitor"
Kaizawa, 1Kenji
1
Nakabayashi, 1Hiroki
Vikaskumar Gupta,
Natsume, 1Hirohiko Tanaka 1,2Akiyama Tatsuya, 1Sureshand 2Shin Kajita
Giri, 1Sota Honsho, 1Ryosuke
1
Nagoya University
Miyachi, 1Kitao Masaya,
1
2
The University of Tokyo
Shota Tomida, 1Yosuke Ishii,
1
Shinji Kawasaki and1
Masaki Tanemura

11:00-11:15 1065
<09aE02O>
Shin-Hung Chen
Feng Chia University"DBD Plasma Water Irrigation
on Soil Farmed A-Choy: From
Seed to Table"
Shin-Hung Chen, Ying-Hung
Chen, Ping-Yen Hsieh and
Ju-Liang He
Feng Chia University

1

Nagoya Institute of Technology
F.C.C. Co. Ltd.

2

11:15-11:30 1161
<09aB04O>
Keigo Takeda
Meijo University"Surface Loss Probability of
H Atom on SUS Surface
Continuously-Irradiated by
Inductively Coupled Remote
H2 Plasma"
Keigo Takeda, Kazushi
Masuda and Mineo
Hiramatsu
Meijo University

11:15-11:30 1194
<09aC06O>
Kazushi Sekiya
Gifu University"Synthesis of WS2 Films on
Sapphire Substrates by Using
Thermal CVD under Ar
Atmosphere"
Kazushi Sekiya, Fumitaka
Ohashi, Kazuma Shirai,
Shunsuke Sugai, Shunta
Kitazawa, Himanshu Jha and
Tetsuji Kume
Gifu University

27

11:15-11:30 1184
<09aE03O>
Sayma Khanom
Kyushu University"Growth Response of
Arabidopsis by Irrigated with
Oxygen Plasma Treated
Water"
Sayma Khanom and Nobuya
Hayashi
Kyushu University

ISPlasma2023/IC-PLANTS2023 March 5 - 9, 2023 Nagoya, Japan

11:30-11:45 1086
<09aB05O>
Shinji Yoshimura
National Institute for Fusion
Science"Laser-Induced Fluorescence
Method Using Asymmetric
Optical Vortex Beams"
1,2
Shinji Yoshimura,
3
Kenichiro Terasaka, 4Hiroki
Minagawa and 4Mitsutoshi
Aramaki1

National Institute for Fusion
Science2
Nagoya University
3
Kyushu University
4
Nihon University

11:30-11:45 1122
<09aC07O>
Galang Dhaifullah Abdul Aziz
National Taiwan University of
Science and Technology"Highly Sensitive
Electrochemical Biosensors
Prepared by AtmosphericPressure Plasma Treatment
on Electrospun Sn/SnO2
Nanofibers Modified Gold
Electrode"
Galang Dhaifullah Abdul
Aziz and Meng-Jiy Wang

11:30-11:45 1051
<09aE04O>
Hiromi Alwi Yamamoto
Meijo University"Lifetime of Bactericidal
Species Generated in Water
Irradiated with Oxygen
Radicals"
1
Hiromi Alwi Yamamoto,
2
Naoyuki Iwata, 2Masaru
Hori and 1Masafumi Ito
1
2

Meijo University
Nagoya University

National Taiwan University of
Science and Technology

12:00-12:40<09aA08K>
Keynote Lecture 5
Chair: Daisuke Ogawa (Chubu University)
Kenji Ishikawa
Nagoya University"Plasma-Driven Science for Emerging Plasma-Processing Technologies"

12:40-13:20 Award / Closing
Chair: Makoto Sekine (Nagoya University)
Presenter: Takashi Ito (Gifu Univesity)

28

ISPlasma2023/IC-PLANTS2023 March 5 - 9, 2023 Nagoya, Japan

Short Presentation (Poster) 1
06P-P1-02

March 6 (MON) 16:45〜18:15

Study on Oxygen Gas Addition Effect on Radical Production of Argon AtmosphericPressure Plasma
1

Hiroto Matsuura, 1Takumi Nakano, 2Yota Okamoto, 2Hu Min, 1Trung Nguyen Tran, 1Ryoko

Asada, 3Yuki Iwata, 3Haruka Suzuki and 3Hirotaka Toyoda
1Osaka Metlopolitan University
Osaka Prefecture University
3
Nagoya University
2

06P-P1-03

Measurement of Two-Dimensional Profiles of Electron Density and Temperature of
450 MHz Ultra-High Frequency Plasma by Laser Thomson Scattering
1

Bohao Li, 2Yiming Pan and 1Kentaro Tomita

1

Hokkaido University
Kyushu University

2

06P-P1-04

Microwave Plasma Production under Air-Flow-Induced Reduced Pressure
1

Taina Ogawa, 1Yuki Iwata, 1Haruka Suzuki and 1,2Hirotaka Toyoda

1

Nagoya University
National Institute for Fusion Science

2

06P-P1-05

Pulsed Plasma Accelerator Source and Optical Diagnostics for the Study of Pulsed
PlasmaAzmirah Ahmed, Sumit Singha, Nirod Kumar Neog and Tridip Kumar Borthakur
Centre of Plasma Physics-Institute for Plasma Research

06P-P1-06

Plasma Treatment on PET Film Using Low-Temperature Atmospheric Pressure
Helium Plasma Jet
1

Tetsuji Shimizu, 1,2Junya Nonaka, 1,2Yuukei Ishihara and 1,2Hajime Sakakita

1

National Institute of Advanced Industrial Science and Technology (AIST)
University of Tsukuba

2

06P-P1-07

Suppression of Induced Voltage Emitted from Corona Discharge Type Ionizer Using
Grounded Grid Electrodes
1

Eriko Nakata, 1Kakeru Uchimido, 1Katsuyuki Takahashi, 1Koichi Takaki, 2Nozomi Takeuchi,

3

Shinichi Yamaguchi and 4Hidemi Nagata

1

Iwate University
Tokyo Institite of Technology
3
Shishido Electrostatic, Ltd.
2

06P-P1-08

Development of a Portable Plasma Generation Device Driven by a BluetoothModulated Power Source for VOC Detection.
Hao-An Yu, Yu-Hong Chu and Cheng-Che Hsu
National Taiwan University

06P-P1-09

Wettability Characteristics of Copper Surfaces Treated with Air Plasma Using HomeMade Atmospheric Pressure Plasma Jet (APPJ)
La Raine Salazar and Christian Lorenz Mahinay
Ateneo de Manila University

29

ISPlasma2023/IC-PLANTS2023 March 5 - 9, 2023 Nagoya, Japan

06P-P1-10

Atomic Composition of Droplet Ejected from Liquidized Sn-Bi-Li-Er Alloy Under
Hydrogen Plasma Exposure
1

Kota Tamura, 2Junichi Miyazawa, 2Suguru Masuzaki, 2Masayuki Tokitani, 2Yukinori Hamaji and

1,2,3

Hirotaka Toyoda

1

Nagoya University
National Institute for Fusion Science
3
Center for Low-temperature Plasma Sciences
2

06P-P1-11

Using Microplasma Spectroscopy for Volatile Organic Compounds Detection in Air
Kuan-Ting Chen, Po-Chien Chang, Wei-Cheng Yen and Cheng-Che Hsu
National Taiwan University

06P-P1-12

Power Absorption of High Negative Pulse Power to an Electron Cyclotron Plasma
1

Ikumi Hamaguchi, 2Kensuke Sasai, 1,2Haruka Suzuki and 1,2,3Hirotaka Toyoda

1

Nagoya University
Center for Low-temperature Plasma Sciences
3
National Institute for Fusion Science
2

06P-P1-13

Measurement of Feedstock Particle Motion in Modulated Thermal Plasmas During
Nanoparticle Synthesis
1

Yasunori Tanaka, 1Ryudai Furukawa, 1Yurina Nagase, 1Yusuke Nakano, 1Tatsuo Ishijima, 2Shiori

Sueyasu, 2Shu Watanabe and 2Keitaro Nakamura
1

Kanazawa University
Nisshin Seifun Group Inc.

2

06P-P1-14

Optical Measurements of Plume Velocity on Pulsed Plasma Thruster
Hiroto Yamada, Masataka Yoshikawa, Takeshi Miyasaka, Masaharu Hori and Makoto Asahara
Gifu University

06P-P1-15

Electron Beam Energy Control Using Multi-DC Grid in Ar/CF4 Inductively Coupled
PlasmaMinseok Kim, Junyoung Park, Beomjun Seo, Changmin Lim and Chinwook Chung
Hanyang University

06P-P1-16

Deuterium Atom Measurement by TALIF in the Spiral Plasma Generator NAGDIS-T
1

Kota Hiraiwa, 2Shin Kajita, 1Ryosuke Nishio, 1Hirohiko Tanaka, 1Keigo Tojo, 3Mitsutoshi

Aramaki, 4Ryo Yasuhara and 1Noriyasu Ohno
1

Nagoya University
The University of Tokyo
3
Nihon University
4
National Institute for Fusion Science
2

06P-P1-17

Electron Energy Distribution Function in HIPIMS Plasma
1,2Kam-Hong Chau, 1,3Yoshinobu Kawai, 2Chi-Wai Kan, 1Jia-Lin Syu, 1Yen-Chun Liu, 1Ying-Hung

Chen, 1Chen-Jui Liang and 1Ju-Liang He
1Feng Chia University
The Hong Kong Polytechnic University
3
Kyuhsu University
2

06P-P1-18

Time Variation of Ion Composition in Dual-Frequency Capacitively-Coupled Ar/
C4F8O2 Pulsed Plasma
1Haruhito Kato, 1Yuto Seki, 1Shuichi Kuboi, 1,2Haruka Suzuki and 1,2,3Hirotaka Toyoda

1

Nagoya University
Center for Low-temperature Plasma Sciences
3
National Institute for Fusion Science
230

ISPlasma2023/IC-PLANTS2023 March 5 - 9, 2023 Nagoya, Japan

06P-P1-19

Study on Plasma Surface Modification in Carbon Fiber Sheet
Taiki Ito, Dinh Quynh, Masaharu Komiyama and Satoshi Nishida
Gifu University

06P-P1-20

High-Speed Measurement for Pulsed Plasma Using the Floating Harmonic Method
Beomjun Seo, Sehun Ahn, Minseok Kim, Jiwon Jung, Junyoung Park and Chinwook Chung
Hanyang University

06P-P1-21

Comparison of Uniformity between Etching Rate and Calculated Plasma Parameterin Dual-Frequency Capacitively Coupled Plasma
1

Shigeyuki Takagi, 1Dong Hao, 2Shih-Nan Hsiao and 2Makoto Sekine

1Tokyo University of Technology
Nagoya University

2

06P-P1-22

Positive and Negative Ion Behaviors in DC-Imposed Ar/SF6 Pulsed Plasma
Kazuki Toji, Takayoshi Tsutsumi, Kenji Ishikawa, Shih-Nan Hsiao, Makoto Sekine and Masaru
Hori
Nagoya University

06P-P1-23

Etching Silicon Oxide, Silicon Nitride, and Polysilicon Films in CH2FCHF2
Hydrofluorocarbon Plasma
Trung Nguyen Tran, Thi-Thuy-Nga Nguyen, Kenji Ishikawa, Shih-Nan Hsiao, Toshio Hayashi,
Makoto Sekine and Masaru Hori
Nagoya University

06P-P1-24

Non-Halogen Plasma Etching of Metal Gate TiAlC
1

Thi-Thuy-Nga Nguyen, 2Kazunori Shinoda, 1Shih-Nan Hsiao, 2Hirotaka Hamamura, 3Kenji

Maeda, 3Kenetsu Yokogawa, 3Masaru Izawa, 1Kenji Ishikawa and 1Masaru Hori
1

Nagoya University
Hitachi, Ltd.
3
Hitachi High-Tech Corp.
2

06P-P1-25

Etching Behavior of Lamellar Poly(styrene-b-2-vinylpyridine) Block Copolymer underN2/H2 Plasma Process
1

Ma. Shanlene Dela Vega, 1Ayane Kitahara, 1Thi-Thuy-Nga Nguyen, 1Takayoshi Tsutsumi,

1

Atsushi Takano, 2Yushu Matsushita and 1Masaru Hori

1

Nagoya University
Toyota Physical and Chemical Research Institute2

06P-P1-26

Study on Plasma Process Using Adsorbed C7F14 as an EtchantKohei Masuda, Makoto Sekine, Kenji Ishikawa, Shih-Nan Hsiao, Takayoshi Tsutsumi, Hiroki
Kondo and Masaru Hori
Nagoya University

06P-P1-73

3D Molecular Dynamics Simulation of Titanium Nitride (TiN) Thin Film Plasma
Deposition with Ti Seed Layer
Bianca Jasmin Manzano, Catherine Joy Dela Cruz and Christian Lorenz Mahinay
Ateneo de Manila University

06P-P2-27

The Charge Carrier Dynamics of CsPbBr3 Perovskite Nanocomposites for
Photocatalytic CO2 Reduction
Ying-Chih Pu
National University of Tainan

31

ISPlasma2023/IC-PLANTS2023 March 5 - 9, 2023 Nagoya, Japan

06P-P2-28

Toward Self-Powered Lithium-Ion Batteries by Developing Porous PVDF-TrFE
Piezo-Separator as Piezoelectric Nanogenerators
Yu-Liang Hsiao, Yen-Ting Chen and Chuan-Pu Liu
National Cheng Kung University

06P-P2-30

Annealing Temperature Dependance of Magnetic Properties of Fe-Ga-Hf Thin Films
1

Kazuho Suzuki, 1Yuji Fujiwara, 2Daiki Oshima, 2Takeshi Kato and 3Mutsuko Jimbo

1

Mie University
Nagoya University
3
Daido University
2

06P-P2-32

Investigation on Ion Migration of Electronic Synapse for Energy Efficient
Neuromorphic Computing
Te-Yu Liao, Chuan-Pu Liu and Chao-Hung Wang
National Cheng Kung University

06P-P2-33

Improving Water Splitting Photoelectrochemical Performance by Synergistic Designof Cu-Doped ZnO Nanorods with CuO Nanoparticles Surface Decoration
1

An-Mi Chang, 2Ying-Chih Pu and 1Chuan-Pu Liu

1

National Cheng Kung University
National University of Tainan

2

06P-P2-34

Characterization of Perovskite Films Prepared by Vapor Phase Process withDifferent Deposition Rates of PbI2
Tamio Iida, Gota Okada, Kento Takase and Mayu Hashimoto
National Institute of Technology, Gifu College

06P-P2-35

Improvement in Initial Coulombic Efficiency by Chemical Pre-Lithiation of SiOx
Anodes for Lithium-Ion Battery
Yu Chen Chen and Chuan Pu Liu
National Cheng Kung University

06P-P2-37

Aspect-Ratio Dependant Interfacial Charge Dynamics and Solar Hydrogen Evolutionof CdSe/CdS Dot-In-Rod Nanostructures
Yu-Chen Wei and Ying-Chih Pu
National University of Tainan

06P-P2-38

CdS@UiO66-NH2 Core@Shell Nanorods for the Photocatalytic CO2 Reduction
Yu-Chieh Li and Ying-Chih Pu
National University of Tainan

06P-P2-39

Applied Carbon-Nanotube Coated Plasma Treatment on Fungial Bioaerosols
Inactivating in Indoor Medical Environment
1

Shinhao Yang, 2Chi-Yu Chuang and 1Ying-Fang Hsu and Hsiao-Chien Huang

1

CTBC Business School
Department of Occupational Safety and Health, Chang Jung Christian University

2

06P-P2-40

Highly Effective Preparation of Graphene Nanoflakes Preparation by Microwave
Plasma Enhanced Chemical Vapor Deposition for Application of High Voltage
Electric Double Layer Capacitors
1,2

Jui-Yu Tung, 2Kun-Ping Huang and 1Meng-Jiy Wang

1

National Taiwan University of Science and Technology
Industrial Technology Research Institute2

32

ISPlasma2023/IC-PLANTS2023 March 5 - 9, 2023 Nagoya, Japan

06P-P3-43

Microplasma-Enabled Silicon Quantum Dot-Based Nanogels (SiQDNG) for Sensitive
and Selective Biomolecular Sensing
Yu Hung Yeh
National Taiwan University of Science and Technology

06P-P3-44

Improved Water Lubrication Characteristics by Using Sillica Nanoparticles Supported
on Si-DLC
1

Masataka Uchiyama, 1Hiroyuki Kousaka and 2Natsuo Horiba

1

Gifu University
Sanyu Tokushu Seiko Company

206P-P3-45

Electroluminescence from High Density Ge/Si Quantum Dots on Sub-Micron Patterned
Si Wires
Yuki Imai, Katsunori Makihara, Noriyuki Taoka, Akio Ohta and Seiichi Miyazaki
Nagoya University

06P-P3-46

Characterization of Light Emission Properties of Superatom-Like Ge-core/Si-shell
Quantum Dots
1,2

Katsunori Makihara, 2Yuji Yamamoto, 1Yuki Imai, 1Noriyuki Taoka, 2Markus Andreas

Schubert, 2,3Bernd Tillack and 1Seiichi Miyazaki
1

Nagoya University
IHP - Leibniz-Institut fur innovative Mikroelektronik
3
Technische Universität Berlin
2

06P-P3-47

The Catalytic and Electronic Properties of Dispersed CeO2 Nanoparticles on a
Substrate in H2 and Low Oxygen Pressure
1

Masakuni Ozawa, 1Masatomo Hattori, 1Takashi Hattori, 1Ryo Kashima and 2Yutaka Majima

1

Nagoya University
Tokyo Institite of Technology

206P-P3-48

Controlling Orientation of Plasma-Surface Modified Hexagonal Boron Nitride byElectric Field  
1

Rui Hasegawa, 1,2Kenichi Inoue, 1Tsuyohito Ito, 2Yoshiki Shimizu, 1Kohzo Ito and 1,2Kazuo

Terashima
1

The University of Tokyo
National Institute of Advanced Industrial Science and Technology (AIST)2

06P-P4-49

HVPE Growth Method of Hexagonal Shape Si by Al-Related Nanostructures
1

Suhyun Mun, 1Seonwoo Park, 1Nam Jun Ahn, 1Kyoung Hwa Kim, 1Hyung Soo Ahn, 1Min Yang,

1,2

Jae Hak Lee, 1Young Tea Chun, 1Sam Nyung Yi, 3Won Jae Lee, 4Sang-Mo Koo and 5Suck-Whan

Kim
1

Korea Maritime and Ocean University
LNBS Co., Ltd.
3
Dong-Eui University
4
Kwangwoon University
5
Andong National University
2

33

ISPlasma2023/IC-PLANTS2023 March 5 - 9, 2023 Nagoya, Japan

06P-P4-50

Characteristics of Si Nanostructures and Crystals Grown on 4H-SiC Substrates
1

Seonwoo Park, 1Suhyun Mun, 1Jang Beom An, 1Kyoung Hwa Kim, 1Hyung Soo Ahn, 1Min Yang,

1,2

Jae Hak Lee, 1Young Tea Chun, 1Sam Nyung Yi, 3Won Jae Lee, 4Sang-Mo Koo and 5Suck-Whan

Kim
1

Korea Maritime and Ocean University
LNBS Co., Ltd.
3
Dong-Eui University
4
Kwangwoon University
5
Andong National University
2

06P-P4-52

Field-Induced Self-Assembly Filament Formation of Carbon Nanotube with Various
Dimensions
Kohei Tomita and Hideki Sato
Mie University

06P-P4-54

Electrospinning of Polymer Nanofibers Containing Carbon Nanotubes Filled with
Iron Nanowires
Mutsuki Fujii, Takumitsu Tsunekawa, Yuji Fujiwara and Hideki Sato
Mie University

06P-P4-55

High-Density Growth of Highly Crystalline Carbon Nanotubes Enabled by a
Microplasma-Based Multi-Step CVD Reactor
Takashi Tsuji, Guohai Chen, Yoshiki Shimizu, Hajime Sakakita, Kenji Hata, Don Futaba andShunsuke Sakurai
National Institute of Advanced Industrial Science and Technology (AIST)

06P-P4-56

Characteristics and Heterostructure of Graphene Oxide /CuBi2O4/TiO2 Composites
Meng-Hsi Huang, Kuo-Chin Hsu, Te-Hua Fang and Ming-Hong Lin
National Kaohsiung University of Science and Technology

06P-P4-58

Observation of Planar Type Atmospheric Pressure Plasma Formed by Tri-Electrode
Dielectric Barrier Discharge
Hiroshi Akamatsu
Kobe City College of Technology

06P-P4-59

Effect of Oxygen Plasma Treatment on Properties of CNW as Electrode Material of
Electrical Double-Layer Capacitor
Takashi Itoh, Junya Ohno, Satoru Goto, Kousei Tanabe and Shigeru Yamada
Gifu University

06P-P4-60

Effect of Hydrogen Embrittlement on the Tribo-Mechanical Properties of TiN-Coated
Aluminum Alloys
Ho Seong Heo and Seong Jong Kim
Mokpo National Maritime University

06P-P4-61

Effect of Hydrogen Embrittlement on Tribological Characteristics of CrN Coated Al
AlloyDong Ho Shin and Seong Jong Kim
Mokpo National Maritime University

06P-P4-62

Electrochemical Characteristics of Austenitic Stainless Steel with Plasma Ion
Nitriding and Electropolishing in Scrubber Washing Water
Hyun-Kyu Hwang and Seong-Jong Kim
Mokpo National Maritime University
34

ISPlasma2023/IC-PLANTS2023 March 5 - 9, 2023 Nagoya, Japan

06P-P4-63

Effect of Temperature History on Peeling Test Results for Evaluating PMMA
Release Properties of DLC Films for Injection Molds
Masanari Kurata, Hiroyuki Kousaka and Tatsuya Furuki
Gifu University

06P-P4-64

Density Functional Theory (DFT) Study on the Organic Radical-Functionalized
Graphene1

Shigeaki Abe, 1Sirus Safaee, 1Mahdis Nesabi, 1Alireza Valanezhad, 1Ikuya Watanabe and 2Hiroto

Tachikawa
1
2

06P-P5-65

Nagasaki University
Hokkaido University

Study on Tensile Properties of Sb2Te3 Nanofilm by MD Simulation
Tang-yu Lai
Air Force Academy

06P-P5-66

Effect of Dose on Lattice Pattern Using Hydrogen Silsesquioxane
1Manabu Yasui, 1Masahito Kurauchi, 1Satoru Kaneko, 1Masahiko Mitsuhashi, 2Yoshiaki Nishijima

and 3Fumikazu Harazono
1

Kanagawa Institute of Industrial Science and Technology (KISTEC)
Yokohama National University
3
Micro Module Technology Co., Ltd.
2

06P-P5-67

Molecular Design of High Density Hydrogen Storage Devices: A DFT Approach
Hiroto Tachikawa, Tetsuji Iyama and Hiroshi Kawabata
Hokkaido University

06P-P5-68

Theoretical Study on Curvature of Carbon Materials and Efficiency of Radical
Addition Reactions
Hiroshi Kawabata, Tetsuji Iyama and Hiroto Tachikawa
Hokkaido University

06P-P5-69

Optical and Electric Properties of Orientated Two-Dimensional Carbon Nitride Films
Hitoe Habuchi, Shigeki Takama and Hayate Aoki
National Institute of Technology, Gifu College

06P-P5-70

Synthesis of 2D-WS2 Flakes Using H2S Gas-Source CVD
1

Kun-An Chiu, 2Jo-Hsin Chuang, 1Wei-Chun Chen, 1Hua-Lin Chen, 1Yu-Wei Lin, 1Che-Chin Chen,

1

Hung-Pin Chen, 2Cheng-Yang Liu and 1Fong-Zhi Chen

1

National Applied Research Laboratories
National Yang Ming Chiao Tung University

2

06P-P5-71

Effect of Work Pressure on Structural Properties of Alignment WS2 Flakes Growth on
Al2O3 by H2S -Gas Source CVD
1

Jo-Hsin Chuang, 2Kun-An Chiu, 2Wei-Chun Chen, 2Hua-Lin Chen, 2Yu-Wei Lin, 2Che-Chin Chen,

2

Hung-Pin Chen, 1Cheng-Yang Liu and 2Fong-Zhi Chen

1

National Yang Ming Chiao Tung University
National Applied Research Laboratories

2

06P-P5-72

Study of in-Plane Alignment of Low-Pressure CVD Graphene on M-Plane Sapphire
Using RHEED
Yuta Yanase, Kazuki Mita, Yasuhiro Fukunishi, Kohei Osamura, Takahiro Maruyama andShigeya Naritsuka
Meijo University

35

ISPlasma2023/IC-PLANTS2023 March 5 - 9, 2023 Nagoya, Japan

Short Presentation (Poster) 2
07P-P1-03

March 7 (TUE) 15:30〜17:00

Angular Momentum Coupling of Gaussian Beam and Misaligned Waveguide Mode
1

Yoshihisa Fujita, 2,3Hiroaki Nakamura, 4Hideki Kawaguchi, 5Shin Kubo, 2Yuki Goto and 6Soichiro

Ikuno
1

Ritsumeikan University
National Institute for Fusion Science
3
Nagoya University
4
Muroran Institute of Technology
5
Chubu University
6
Tokyo University of Technology
2

07P-P1-04

Antenna Study to Enhance Measurement Accuracy for Curling Probe
Shota Kato, Keiji Nakamura and Daisuke Ogawa
Chubu University

07P-P1-05

Development of a Tomography Calculation Code for Three-Dimensional Emission
Profile Reconstruction1

Kenta Harada, 1Manabu Kyuzo, 2Satoshi Ohdachi and 1Hirotaka Toyoda

1

Nagoya University
National Institute for Fusion Science2

07P-P1-06

Study to Measure Electron Density in Plasma with a Curling Probe Embedded into an
Electrode
Yuki Kihira, Keiji Nakamura, Hideo Sugai and Daisuke Ogawa
Chubu University

07P-P1-07

Molecular Dynamics Simulations on the Growth of Diamond-Like Carbon Thin Filmon Silicon Substrate
Myles Denzel Delatore, Catherine Joy Dela Cruz and Christian Lorenz Mahinay
Ateneo de Manila University

07P-P1-08

Machine Learning with Plasma Spectroscopy for Volatile Organic Compounds
Classification with Limited Optical Emission Spectroscopic Data
Xuan-Lun (Jeff) Zhang, Tsung-Shun (Andy) Ko and Cheng-Che (Jerry) Hsu
National Taiwan University

07P-P1-09

Real-Time Diagnostics with Plasma Spectroscopy Using Machine Learning
Min-Hsu (Kevin) Tai and Cheng-Che (Jerry) Hsu
National Taiwan University

07P-P1-10

Coupled Simulation of Negative Corona Discharge with Electrospray from a Liquid
Taylor Cone
Sohto Katsuno, Yusuke Nakagawa and Fumiyoshi Tochikubo
Tokyo Metropolitan University

07P-P1-11

Particle Simulation of Ionization Process on Racetrack-Shaped Hall Thruster
Hana Tsuchiya, Jyunnoosuke Ito, Takeshi Miyasaka, Issei kato and Makoto Asahara
Gifu University

07P-P1-12

Numerical Analysis of Effective Utilization of CH4 Gas in Ar/CH4 Plasma for DLC
Films Deposition
1

Shun Sasaki, 1Takuya Ishihara, 2Hiroyuki Kousaka and 1Akinori Oda

1Chiba Institute of Technology
Gifu University

236

ISPlasma2023/IC-PLANTS2023 March 5 - 9, 2023 Nagoya, Japan

07P-P1-14

Particle Modeling of Rotating Spokes on ExB Plasma Devices
Masayuki Takahashi
Tohoku University

07P-P1-15

Thermal Response of Nano-Tendril Bundles to Steady and Transient Heat Loads  
1

Qi Xue, 1Rongshi Zhang, 1Kenta Hori, 1Hirohiko Tanaka, 2Shin Kajita, 3Tatsuya Kuwabara and1

Noriyasu Ohno

1

Nagoya University
The University of Tokyo
3
Aichi Institute of Technology
2

07P-P1-16

Influence of Dielectric Materials in Pulsed Micro-Gap Cylindrical Dielectric Barrier
Discharge Reactor on the CO2 Conversion Performance
Primas Emeraldi, Tsutomu Imai, Yukio Hayakawa and Shinji Kambara
Gifu University

07P-P1-18

Improved Methanol Selectivity via Addition of Auxiliary Gases in a Water GroundPlasma Reactor
Robert Masumbuko, Nobusuke Kobayashi, Yoshinori Itaya and Akira Suami
Gifu University

07P-P1-19

Structural Change of Mg Oxide Treated by Low Temperature Hydrogen Plasma
Akihisa Ogino and Manatsu Kishi
Shizuoka University

07P-P1-20

Effect of Reduction Treatment on Iron Phthalocyanine / Graphene Oxide Composites
Using Atmospheric Pressure Plasma
Fuka Hayakawa, Ikumi Ohsawa, Takahiro Saida and Takayuki Ohta
Meijo University

07P-P1-21

Electrochemical Characteristics and Interfacial Contact Resistance of Plamsa
Nitrided Titanium as PEMFC Bipolar Plate
Ho Seong Heo and Seong Jong Kim
Mokpo National Maritime University

07P-P1-22

Electrochemical Characteristics of Plasma Ion Nitriding and PVD Coated Al Alloyfor Metallic Bipolar Plates of PEMFCs
Dong Ho Shin and Seong Jong Kim
Mokpo National Maritime University

07P-P1-23

Investigation on the Friction and Wear Characteristics of Plasma Nitride and Hard
Anodized Aluminum Alloys for Hydrogen Valves
Hyun-Kyu Hwang and Seong-Jong Kim
Mokpo National Maritime University

07P-P1-24

Using Plasma Catalyst Hybrid Reactor to Decompose Chlorine-Containing Organic
Waste GasYi Yen and Chi-Sheng Wu
National Taiwan University

37

ISPlasma2023/IC-PLANTS2023 March 5 - 9, 2023 Nagoya, Japan

07P-P1-25

Plasma Induces Polymorphization of Crystal Structures in Sugar Alcohol
1

Ryosuke Watanabe, 1Yuya Haraguchi, 2Yoshikazu Hattori, 1Hiroko Katori, 3Gen Hayase,2

Tomohide Saio and 1Daisuke Yoshino

1

Tokyo University of Agriculture and Technology
Tokushima University
3
National Institute for Materials Science2

07P-P2-26

Characteristics of Amorphous Ga2O3 Thin Film Growth on Ti Substrates at Low
Temperatures Using MOCVD
Nam Jun Ahn, Jang Beom An, Kyoung Hwa Kim, Hyung Soo Ahn and Min Yang
Korea Maritime and Ocean University

07P-P2-27

Low Temperature Growth of Ga2O3 Thin Films on Si Substrates by MOCVD and their
Electrical Characteristics
Jang Beom An, Jung Bok Lee, Nam Jun Ahn, Kyoung Hwa Kim, Hyung Soo Ahn and Min Yang
Korea Maritime and Ocean University

07P-P2-28

High-InN-Mole-Fraction GaInN QWs with a Thin AlN Cap Layer Grown with H2
Motoki Nakano, Ruka Watanabe, Tsuyoshi Nagasawa, Koutaro Nozu, Tetsuya Takeuchi, Satoshi
Kamiyama and Motoaki Iwaya
Meijo University

07P-P2-29

Self-Aligned Ohmic Contact Formation Combining Growth of N+-GaN and Ohmic
Metalization Using Pulsed Laser Deposition with Picosecond Laser
1

Kazuki Kodama, 2Mitsuhiko Miyachi, 1Osamu Oda, 1Masaru Hori and 1Daisuke Ueda

1

Nagoya University
Alpha System

2

07P-P2-30

AlGaN Photodetector with Multi-Channels Porous-AlGaN/GaN Stack Structure
Kuan-Ming Chen and Chia-Feng Lin
National Chung Hsing University

07P-P2-32

High-Frequency Signal Coupling in Monolithically-Integrated Ⅲ -Nitride Devices
Xiao Ma and Hoi Wai Choi
University of Hong Kong

07P-P2-33

InGaN Micro Light-Emitting Diodes with a Current Confinement Structure andBottom Porous-GaN Distributed Bragg Reflector
Yi-Sian Hsieh, Yu-Cheng Kao and Chia-Feng Lin
National Chung Hsing University

07P-P2-34

Impact of Ultra-High-Pressure Annealing on Interface State Density Distribution near
Conduction Band at Al2O3Mg-Ion-Implanted GaN Interface
1

Yuki Hatakeyama, 1Masamichi Akazawa, 2Tetsuo Narita, 3,4Michal Bockowski and 3Tetsu Kachi

1

Hokkaido University
Toyota Central R&D Labs., Inc.
3
Nagoya University
4
Institute of High Pressure Physics (PAS)2

07P-P2-35

Drain Current Lag Characterization of Fe- and C-Doped GaN Buffer HEMTs on GaN
Substrates
Maria Emma Villamin and Naotaka Iwata
Toyota Technological Institute38

ISPlasma2023/IC-PLANTS2023 March 5 - 9, 2023 Nagoya, Japan

07P-P2-36

Impact of O2 Annealing on Electronic States of P-Type GaN(0001) Surface
Zijun Zhou, Xiaoyu Tian, Akio Ohta, Noriyuki Taoka, Katsunori Makihara and Seiichi Miyazaki
Nagoya University

07P-P2-37

Van Der Waals Epitaxial Growth and Characterization of h-AlN Ultra-Thin Film on
2D-WS2 by PA-MOMBE
1

Wei-Chun Chen, 2Mu-Huan Lee, 1Kun-An Chiu, 3Yen-Teng Ho, 3Shu-Jui Chang, 1Yu-Wei Lin,

1

Che-Chin Chen, 1Hung-Pin Chen, 2Shih-Feng Tseng, 1Chao-Te Lee and 1Fong-Zhi Chen

1

National Applied Research Laboratories
National Taipei University of Technology
3
National Yang Ming Chiao Tung University
2

07P-P2-38

Co-Deposition of Cesium and Oxygen on AlGaN for Increase in Thermionic Emissionof Semiconductor
1

Kai Namura, 1Akihisa Ogino, 2Shigeya Kimura, 2Hisashi Yoshida and 2Hisao Miyazaki

1

Shizuoka University
Research and Development Center,Toshiba Corporation

2

07P-P3-39

Preparation of Low-Molecular-Weight Fucoidan Using Multi-Nozzle Linear DBD in
Contact with Liquid1

Sayaka Yamamoto, 1Haruki Kato, 1Jun-Seok Oh, 1Tatsuru Shirafuji, 2Shiori Maezawa and

2

Motoko Takaoka

1Osaka Metropolitan University
Kobe College

2

07P-P3-40

On the Possibility of a Plasma-Liquid Interface Process Using a DBD-Embedded GasLiquid Micro-Contactor
Tatsuru Shirafuji and Jun-Seok Oh
Osaka Metropolitan University

07P-P3-41

Time Dependent Nanoparticle Density Measurement in a Liquid-Flow Plasma Process1

Kengo Yunoki, 1,2Haruka Suzuki, 2Kensuke Sasai and 1,2,3Hirotaka Toyoda

1

Nagoya University
Center for Low-temperature Plasma Sciences
3
National Institute for Fusion Science2

07P-P3-42

Development of a Platform for Rapid Optimization of Heavy Metal Detection Using
Plasmas in Solution with Optical Emission Spectrometry
Ching-Yuan Wang, Tsung-Min Chang and Cheng-Che Hsu
National Taiwan University

07P-P3-43

Development of a Long-Term, Real-Time, and Remote Heavy Metal Monitoring
System in Solution by Plasmas Modulated Using Raspberry Pi
Tsung-Min Chang, Ching-Yuan Wang, Jian-Ti Chen and Cheng-Che Hsu
National Taiwan University

07P-P3-44

UV-Vis-NIR Spectrophotometry for Methylene Blue Decomposition with Plasma
1

Yamato Torii, 2Yuta Matsumoto, 2Ryosuke Otsuki, 1Shyunya Hashimoto, 1,2Tatsuru Shirafuji and

1,2

Jun-Seok Oh

1Osaka City University
2
Osaka Metropolitan University

39

ISPlasma2023/IC-PLANTS2023 March 5 - 9, 2023 Nagoya, Japan

07P-P4-46

Surface Zwitterionation of Polypropylene Non-Woven Fabric for the Control of
Human Blood Leukodeplete by Dielectric Barrier Discharge Plasma
Yung-Chih Chen, Yung Chang and Ta-Chin Wei
Chung Yuan Christian University

07P-P4-47

Morphological Effect of Carbon Nanowalls on Exosome Capture
1

Takumi Hashimoto, 1Hiroki Kondo, 1Hiromasa Tanaka, 1Kenji Ishikawa, 1Takayoshi Tsutsumi,

1

Makoto Sekine, 1Takao Yasui, 1Yoshinobu Baba, 2Mineo Hiramatsu and 1Masaru Hori

1

Nagoya University
Meijo University

2

07P-P4-48

Surface Treatment of 3D Printed Poly(ε-Caprolactone) Scaffolds Using an
Atmospheric Pressure Plasma Jet System
Marina Mercedes Mendoza, Christian Lorenz Mahinay and Catherine Joy Dela Cruz
Ateneo de Manila University

07P-P4-49

Control of Generating White Core in Grains of Brewer's Rice Cultivar with Direct
Plasma Irradiation to Spikelet after Flowering
1

Hiroshi Hashizume, 1Hidemi Kitano, 1Hiroko Mizuno, 1Akiko Abe, 1Kaoru Sanda, 1Shih-Nan

Hsiao, 2Genki Yuasa, 2Satoe Tohno, 1Hiromasa Tanaka, 1Kenji Ishikawa, 1Shogo Matsumoto,1

Hitoshi Sakakibara, 2Yuji Hirosue, 1Masayoshi Maeshima, 1Masaaki Mizuno and 1Masaru Hori

1

Nagoya University
Fujitsu Client Computing Limited

2

07P-P4-50

Cold Plasma Treatment During Cultivation Affects Flesh Firmness of Strawberry
Fruits1

Hiroshi Hashizume, 2Kohei Nakano, 1Kaoru Sanda, 1Akiko Abe, 1Hiroko Mizuno, 2Manasikan

Thammawong, 1Camelia Miron, 1Nikolay Britun, 2Teruaki Shimazu, 1Hiromasa Tanaka and1

Masaru Hori

1

Nagoya University
2
Gifu University

07P-P4-51

Effect of Plasma Activated Water Treated by LF-Microwave Hybrid Plasma on
Enhancement of Plant Growth1

Norrawit Tonmitr and 2Akira Yonesu

1

Khon Kaen University
University of the Ryukyus

2

07P-P4-52

Dielectric Barrier Discharge Plasma Aerophonic to Grow Vegetable
Ying-Hung Chen, Guan-Heng Lyu, Ping-Yen Hsieh and Ju-Liang He
Feng Chia University

07P-P4-53

Enhancement Effects of Ambient-Air Glow-Discharge Treatment on Enzymatic
Digradation of Lignin
1

Ryuichi Ohashi, 2Naoyuki Iwata, 1Hiroyuki Kato, 1Yasuhiro Nishikawa, 1Motoyuki Shimizu,

1

Masashi Kato, 2Masaru Hori and 1Masafumi Ito

1

Meijo University
Nagoya University

240

ISPlasma2023/IC-PLANTS2023 March 5 - 9, 2023 Nagoya, Japan

07P-P4-54

Enhancement of Reacation Efficiency of Ambient-Air Glow Discharge with
Carboxymethyl-Cellulose by Narrowing Solution-Flow Path
1

Kazuma Okamoto, 1Hiroyuki Kato, 1Masahiro Maebayashi, 1Motoyuki Shimizu, 1Masashi Kato,

2

Masaru Hori and 1Masafumi Ito

1

Meijo University
Nagoya University

2

07P-P4-55

Germination Properties of Mung Beans (Vigna radiata L. var. UPL Mg-7) under the
Effects of Plasma-Activated Water and Atmospheric Pressure Plasma Jet Treatment  
Jose Carlo Leyesa, Christian Lorenz Mahinay and Catherine Joy Dela Cruz
Ateneo de Manila University

07P-P4-56

Effects of Plasma Treated Water on Papaya Seed Germination
1

Deng-Ke Xi, 2Xian-Hui Zhang, 2Si-Ze Yang, 2Seong Shan Yap, 3Kenji Ishikawa, 3Masaru Hori and1Seong Ling Yap

1

University of Malaya
2
Xiamen University
3
Nagoya University

07P-P4-57

MEMS Nozzle for Capturing Lily Pollen in Array and Fixing on Culture Media
1

Sachiko Sugiyama, 1Gang Han, 2Takayoshi Tsutsumi, 2Hiromasa Tanaka and 1Minoru Sasaki

1

Toyota Technological Institute
Nagoya University

2

07P-P4-58

Co/Fe Co-Doped ZnO Vertical Nanorods as a Promising NO2 Gas Sensor Via Simple
and Low-Cost Hydrothermal Synthesis
1

Guan-wu Hou, 1Shih-Chih Chen, 2Chih-Hung Lin and 1Yeh-Szu Hsien

1

National Yunlin University of Science and Technology
Taiwan Semiconductor Research Institute (TSRI)

2

41

ISPlasma2023/IC-PLANTS2023 March 5 - 9, 2023 Nagoya, Japan

Short Presentation (Poster) 3
08P-P1-01

March 8 (WED) 16:30〜17:00

Intracellular Fluorescent of Nitric Oxide in Fibroblasts Irradiated by ElectricallyNeutral Radical
1

Yasumasa Mori, 2Naoyuki Iwata, 1Tomiyasu Murata, 2Masaru Hori and 1Masafumi Ito

1

Meijo University
Nagoya University

2

08P-P1-02

Time-Developing Observation of Supported Lipid Bilayer in Oxygen-RadicalActivated L-Tryptophan Solution Using Atomic Force Microscope
1

Takashi Namizaki, 2Naoyuki Iwata, 3Ryugo Tero, 2Hiroki Kondo, 2Masaru Hori and 1Masafumi

Ito
1

Meijo University
Nagoya University
3
Toyohashi University of Technology
208P-P1-03

Effect of Lactate Activated with Nitrogen and Oxygen Radicals on Inactivation ofBreast Cancer Cells
1

Taiga Nishida, 2Naoyuki Iwata, 1Tomiyasu Murata, 2Hiromasa Tanaka, 2Masaru Hori and1

Masafumi Ito

1

Meijo University
2
Nagoya University

08P-P1-04

Analysis of Effect of Neutral-Oxygen-Radical Irradiation on Biodegradation ofPolyethylene Terephthalate Using High-Performance Liquid Chromatography  
1Daichi Goto, 1Naoyuki Iwata, 1Kenji Ishikawa, 1Hiroshi Hashizume, 1Hiromasa Tanaka,

2

Masafumi Ito and 1Masaru Hori

1

Nagoya University
Meijo University

2

08P-P1-05

Low Temperature Plasma Chemistry of Aqueous Solutions of Amino Acids. A Spin
Trapping Study
Takashi Kondo, Hiroshi Hshizume, Jun Kumagai, Hiromasa Tanaka, Kenji Ishikawa and Masaru
Hori
Nagoya University

08P-P1-06

Differential Response of Gold Nanoparticles and Gold Nano-Rods Combined with Cold
Atmospheric Plasma and Other Physical Modalities
1,2

Mati Ur Rehman, 2Paras Jawaid, 2Qing-Li Zhao, 2Jun-ichi Saitoh, 2Kyo Noguchi and 2,3Takashi

Kondo
1

The Aga Khan University
University of Toyama
3
Nagoya University
2

08P-P1-07

Effects of Metabolic Inhibitors on Plasma-Activated Medium-Induced Cytotoxicity
Shu Tanaka, Sakura Tanahashi, Misaki Nagaya, Tetsuro Kamiya and Hirokazu Hara
Gifu Pharmaceutical University

08P-P1-08

Plasma-Activated Medium Enhances Anticancer Drug-Induced Toxicity Mediated by
Reduciton of Claudin-2 Expression in Lung Adenocarcinoma
1

Hiroaki Eguchi, 1Yaqing Yu, 1Yuta Yoshino, 1Satoshi Endo, 2Hiromasa Tanaka, 1Hirokazu Haraand 1Akira Ikari
1

Gifu Pharmaceutical University
Nagoya University

242

ISPlasma2023/IC-PLANTS2023 March 5 - 9, 2023 Nagoya, Japan

08P-P1-09

Oxidative DNA Damage in Human Lung Cancer Cells Treated with Non-Thermal
Atmospheric-Pressure Plasma
Hirofumi Kurita, Khulan Bidbayasakh, Nao Kitajima and Sumire Arai
Toyohashi University of Technology

08P-P1-10

Development of Three-Dimensional Perfusion Culture Device for Analysis of Plasma
Exposure Effects on Spheroid
Hayata Okino and Shinya Kumagai
Meijo University

08P-P1-11

Analysis of Plasma Exposure Effects on Cell Membrane
Yuto Ando and Shinya Kumagai
Meijo University

08P-P1-12

Analysis of Plasma Exposure Effects on Cell Proliferation and Fluorescent Reagent
Introduction
Hisashi Hayashi and Shinya Kumagai
Meijo University

08P-P1-13

Investigation of Plasma Gene Transfection Mechanism by Equivalent Circuit Analysis  
1Soya Tanaka, 1Hideki Motomura, 1Yoshihisa Ikeda, 1,2Susumu Satoh and 1Masafumi Jinno

1

Ehime University
I-Gene Corporation Ltd.

2

08P-P1-14

Inactivation of Endogenous Enzyme in Scallops Using Pulsed Electric Field
Yuri Fujiwara, Katsuyuki Takahashi, Koichi Takaki and Chun Hong Yuan
Iwate University

08P-P1-15

Effects of Non-Equilibrium Atmospheric Pressure Plasma on Zebrafish
Yuya Kurebayashi, Kenji Ishikawa, Hiroshi Hashizume, Hiromasa Tanaka, Shinichi Akiyama
and Masaru Hori
Nagoya University

08P-P1-16

Mass Spectrometric Study of Ions and Neutral Species Generated by a High-Density
Atmospheric-Pressure Plasma Source  
1

Kyosuke Sugie, 2Jun-Seok Oh, 3Hiromasa Tanaka, 3Masaru Hori and 1Masafumi Ito

1

Meijo University
Osaka Metropolitan University
3
Nagoya University
2

08P-P2-17

Trial of Elemental Gradient Functional Thin Films Preparation by Sputtering with
Mixed Powder Targets Ⅱ
Hiroharu Kawasaki, Tamiko Ohshima, Yoshihito Yagyu, Takeshi Ihara, Yusuke Hibino, Takahiro
Satake and Yoshiaki Suda
National Institute of Technology, Sasebo College

08P-P2-20

Optimization the Touch Sensing Property of Ga-Doped ZnO Thin Films by Inclined
Angles Process
Yu-Chun Lin and Yen-Sheng Lin
I-Shou University

43

ISPlasma2023/IC-PLANTS2023 March 5 - 9, 2023 Nagoya, Japan

08P-P2-21

Study on Different Nitrogen Flow Process of the Al-Doped ZnO Thin Films to Apply
on CO Gas Sensor
Fang-Jun Lin and Yen-Sheng Lin
I-Shou University

08P-P2-22

Optimizing the Optoelectronic Properties of GZO Thin Films by Using Inclined Angle
Deposited Process
Sheng-Ping Hsu and Yen-Sheng Lin
I-Shou University

08P-P2-23

Control of  Structural Change and Resistive Switching Properties of CoOx Films
Deposited by UHV-RF Magnetron Sputtering
Jun Tae Ahn, Taeyoung Kim, Yoonsok Kim, Chang Wan Ahn and Eun Kyu Kim
Hanyang University

08P-P2-24

Crystal Growth of Epitaxial Oxide Film Predicted on Silicon Substrate by Molecular
Dynamics
1,3
3

Satoru Kaneko, 2Takashi Tokumasu, 1Manabu Yasui, 1Masahito Kurouchi, 3Masaki Azuma,

Akifumi Matsuda, 3Mamoru Yoshimoto, 4Ruei Yu, 5Musa Can, 6Sumanta Sahoo, 6Kripasindhu

Sardar, 6Jyn-Ming Ting and 6Masahiro Yoshimura
1

Kanagawa Institute of Industrial Science and Technology (KISTEC)
Tohoku University
3
Tokyo Institite of Technology
4Asia University
5
Istanbul University
6
National Cheng Kung University
2

08P-P2-25

Design and Analysis of AZO Thin Films to Apply on Lower Temperature CO Gas
SensingXuan-Yu Wu, Yen-Sheng Lin and Zhong-Ting Zheng
I-Shou University

08P-P2-27

Effect of Oxidant Sources on Carbon-Related Impurities in ALD-Al2O3 for Solid-State
Devices
Shiro Ozaki, Yusuke Kumazaki, Naoya Okamoto, Yasuhiro Nakasha, Toshihiro Ohki and Naoki
Hara
Fujitsu Limited

08P-P2-29

Carrier Mobility Enhancement of a-IZTO TFTs with Aluminum Capping Layer
Cheng-Wei Lai and Ching-Lin Fan
National Taiwan University of Science and Technology

08P-P2-30

Biocompatible and Anti-Corrosion Thin Films Prepared by Plasma Polymerization
1

Wei-Ting Ting, 2Ko-Shao Chen and 1Meng-Jiy Wang

1

National Taiwan University of Science and Technology
Tatung University

2

08P-P2-31

Deposition of Si Nanowire Films by Using High-Pressure He Plasma Sputtering
Kodai Masumoto, Misao Kiga, Teruya Yamada, Ryo Hanai and Giichiro Uchida
Meijo University

44

ISPlasma2023/IC-PLANTS2023 March 5 - 9, 2023 Nagoya, Japan

08P-P3-33

Deposition of Diamond Like Carbon Using Double-Pulse Target Voltage on HighPower Pulsed Magnetron Sputtering
1

Hiro Kunieda, 2Akinori Oda, 3Hiroyuki Kousaka and 1Takayuki Ohta

1

Meijo University
Chiba Institute of Technology
3
Gifu University
2

08P-P3-34

Deposition of Diamond-Like Carbon Film Using Ar/Xe Mixture Gas on High Power
Pulsed Magnetron Sputtering  
1

Keita Takeda, 2Akinori Oda, 3Hiroyuki Kousaka and 1Takayuki Ohta

1

Meijo University
Chiba Institute of Technology
3
Gifu University
2

08P-P3-35

Microstructural Characterization of Y2O3-MgO Nanocomposite Films Prepared by
Magnetron Sputtering
1

Shih-Yung Huang, 2Yu-Hao Zhang, 2Pi-Chuen Tsai and 1Wei-Kai Wang

1

Da-Yeh University
National Formosa University

2

08P-P3-36

Deposition of Ge Nanoparticle Anode Films for Li Ion Battery
Ryo Hanai, Teruya Yamada, Misao Kiga, Kodai Masumoto and Giichiro Uchida
Meijo University

08P-P3-37

Study of Electrochemical Process between Li-C Nano-Composite and Graphene
through In-Situ TEM Observation
1

Suresh Giri, 1Wei Ming Lin, 1Shota Tomida, 1Vikaskumar Gupta, 1Masaya Kitao, 2Yazid Bin

Yaakob, 1Toru Asaka and 1Masaki Tanemura
1

Nagoya Institute of Technology
Universiti Putra Malaysia

2

08P-P3-38

Emission Spectroscopy during Film Formation by Plasma CVD by HMDSO / Ar
SystemShunya Iwata, Masaharu Komiyama and Satoshi Nishida
Gifu University

08P-P3-39

Effect of Deposition Temperature for Cubic Boron Nitride Film by Electron Beam
Excited Plasma  
1

Koji Yamakawa, 1Hiroyuki Yamamoto, 1Shoji Den, 2Seigo Takashima, 3Masanao Iwata, 4Kenji

Ishikawa and 4Masaru Hori
1

Katagiri Engineering Co., Ltd.
Nagoya Industries Promotion Corporation
3
Iwata Tool Co., Ltd.
4
Nagoya University
2

08P-P3-40

Deposition of TiO2 Thin Film Using High Power Pulsed Magnetron Sputtering
Miyuki Nishimura and Takayuki Ohta
Meijo University

08P-P4-41

Numerical Investigation on RF-Modulated Pulsed He/CH4 Plasmas at SubAtmospheric Pressure for Fabrication of Hard Diamond-Like Carbon Films  
Akinori Oda, Shun Sasaki, Tasuya Sasaki, Yusaku Mita and Ryo Fujita
Chiba Institute of Technology

45

ISPlasma2023/IC-PLANTS2023 March 5 - 9, 2023 Nagoya, Japan

08P-P4-42

Creating Slippery and Sticky Hydrophobic Surfaces Using C4F8 Capacitively Coupled
PlasmasYen-Hung Liu and Cheng-Che Hsu
National Taiwan University

08P-P4-43

Characterization of Plasmas and Polymerized Hydrofluorocarbon Films in
Capacitively Coupled CF4/H2 Plasmas  
1

Yusuke Imai, 2Shih-Nan Hsiao, 2Takayoshi Tsutsumi, 2Kenji Ishikawa, 2Makoto Sekine and2

Masaru Hori

1

Nagoya University
Center for Low-temperature Plasma Sciences

2

08P-P4-44

Investigation of In-Situ Al Doping for P-Type SiC Thin Films Using Tri-MethylAluminum Introduced into Vinylsilane
1

Yuuki Tsuchiizu, 1Takuhiro Hasegawa, 1Kouki Ono, 2Sigeo Yasuhara and 1Wakana Takeuchi

1

Aichi Institute of Technology
Japan Advanced Chemicals

2

08P-P4-45

Growth of SiC Thin Films on Various Metal Substrates by Thermal Chemical Vapor
Deposition Method Using Vinylsilane
1

Takuhiro Hasegawa, 1Kouki Ono, 1Yuuki Tsuchiizu, 2Sigeo Yasuhara and 1Wakana Takeuchi

1

Aichi Institute of Technology
Japan Advanced Chemicals

2

08P-P4-46

Characteristics of Incident Particle Flux Determining Growth Rates and Electrical
Properties of Indium Tin Oxide Films Deposited by Ion-Plating with Dc Arc
Discharge
1,2

Hisashi Kitami, 1Toshiyuki Sakemi and 2Tetsuya Yamamoto

1

Sumitomo Heavy Industries, Ltd.
Kochi University of Technology

208P-P4-47

Argon Assisted Crystallization of Silicon Film with Hydrogen Dilution
Chiung-Wei Lin and Hong-Li Lin
Tatung University

08P-P4-48

Preparation of Al-Doped Zinc Oxide Thin Films Using Mixed Powder Targets withDifferent Bulk Densities
1,2

Tamiko Ohshima, 1Hiroharu Kawasaki, 1Yusuke Hibino, 1,3Takahiko Satake, 1Yoshihito Yagyu,

1Takeshi Ihara, 2Naho Itagaki, 2Kazunori Koga and 2Masaharu Shiratani

1

National Institute of Technology, Sasebo College
Kyushu University
3
Sojo University
2

08P-P4-49

Development of the Ultra-High Transparent Conducting Oxide Multi-Layer Thin Film
Using the Sputtering Method
Yi-Tzu Tseng, Yu-Ting Tseng, Bo-Chun Chen and Chia-Ching Wu
National Taitung University

08P-P4-51

Droplet-Vaporization Behavior Analysis in Plasma for Fablication of 3D
Nanostructured Zinc Oxide Thin Films by Plasma-Assisted Mist CVD
Kosuke Takenaka, Susumu Toko and Yuichi Setsuhara
Osaka University

46

ISPlasma2023/IC-PLANTS2023 March 5 - 9, 2023 Nagoya, Japan

08P-P4-52

Effects of Chemical Compositions on the Semiconductor Characteristics of MgCo2O4
Thin Films  
1

Ruei-Sung Yu, 1I-Yun Hsieh, 1I-Chen Hsu and 2Satoru Kaneko

1Asia University
Kanagawa Institute of Industrial Science and Technology (KISTEC)

2

47