Product Information

LIC 4113V
LIC 4193V
Exposed Linear Encoders
for High Vacuum01/2020

LIC 4113V, LIC 4193V
Exposed linear encoders for high vacuum applications• Measuring lengths up to 3 m• Measuring steps down to 0.001 µm• Glass or glass ceramic measuring standard• Measuring standard is secured with fixing clamps

Position of the stop pins

Mounting possibilities for scanning head
(shown without fixing clamps)

F = Machine guideway* = Mounting error plus dynamic guideway errorⓈ = Beginning of measuring length (ML)Ⓒ = Code start value: 100±1 mmⓁ = Linear scale lengthⒼ = Fixed-point element for defining the thermal fixed point
1 = Gap is adjusted with a spacer shim during mounting
2 = Depends on measuring length (ML); use additional pair of fixing clamps
3 = Adhesive
4 = Mounting clearance between scanning head and linear scale
5 = Optical centerline
6 = Direction of motion of the scanning unit for ascending position values

2Product Information: LIC 4113V, LIC 4193V   01/2020

Linear scale

LIC 4003

Measuring standard
METALLUR grating on glass ceramic or glass
Coefficient of linear expansion* Þtherm  8 · 10–6 K–1 (glass)Þtherm = (0±0.5) · 10–6 K–1 (Robax glass ceramic)
Accuracy grade*±1 µm (only for Robax glass ceramic), ±3 µm, ±5 µm

Baseline error

 ±0.275 µm/10 mm

Measuring length (ML)*in mm

240	 340	 440	 640	 840 1040 1240 1440 1640 1840
2640 2840 3040 (Robax glass ceramic only up to ML of 1640)

Mass

3 g + 0.1 g/mm of measuring length

Scanning head

LIC 411V

LIC 419 F V

LIC 419 M V

LIC 419 P V

LIC 419Y VInterface

EnDat 2.2

Fanuc SerialInterface Þi

Mitsubishi highspeed interface

Panasonic SerialInterface

Yaskawa SerialInterface

Ordering designation*

EnDat22

Fanuc05

Mit03-4

Pana02

YEC07

Measuring step*

0.01 µm (10 nm)
0.005 µm (5 nm)
0.001 µm (1 nm)1)

Calculation time tcal
Clock frequency

 5 µs16 MHzTraversing speed2)

 600 m/min

Interpolation error±20 nmElectrical connection

Cable (1 m or 3 m) with 15-pin D-sub connector (female)

Cable length(with HEIDENHAIN cable)

 100 mSupply voltage

DC 3.6 V to 14 V2)Power consumption (max.)

At 3.6 V:  700 mW At 3.6 V:  850 mW
At 14 V:  800 mW At 14 V:  950 mW

Current consumption (typical)

At 5 V: 75 mA(without load)

Vibration 55 Hz to 2000 Hz
Shock 6 ms

 500 m/s2 (EN 60068-2-6)
 1000 m/s2 (EN 60068-2-27)

Operating temperature–10 °C to 50 °C

Baking temperature

100 °C

Vacuum classHigh vacuum down to 10

Protection EN 60529

IP40

Mass

Scanning head
Cable
Connecting element

Mit03-22040 2240 2440–

 50 m 30 m 50 mAt 5 V: 95 mA (without load)–7mbar18 g (without cable)
21 g/m
D-sub connector: 64 g

* Please select when ordering1)
Mitsubishi: measuring length  2040 mm; Yaskawa: measuring length  1840 mm2)
See General electrical information in the Interfaces of HEIDENHAIN Encoders brochure
Robax is a registered trademark of Schott-Glaswerke, Mainz, Germany
Product Information: LIC 4113V, LIC 4193V   01/2020

3

These vacuum-compatible encoders
feature the following characteristics:• Air vents• Clean-room manufacturing• Specialized cleaning and packaging• Cable with PTFE insulation and tin-platedcopper braiding
Residual gas analysis
The influence of encoders on the quality ofa vacuum can be determined throughresidual gas analyses. In these analyses, asample in a vacuum chamber is pumped
out to at least 10–6 mbar (turbomolecularpump, pumping speed 15 l/s to 200 l/s).
The residual gases are measured with amass spectrometer (Pfeiffer QMA 200) andan absolute pressure sensor (VACOMATMION). The outgassing behavior of theexamined sample can then be deduced bysubtracting the typical residual gases of theempty chamber.
The amount of remaining residual gases
depends not only on the cleanliness of thesample and the tested materials, but also
on the pump type used and its pumping
speed. The higher the pumping speed forthe measurement is, and the longer thegas is pumped out, the lower the amountof residual gases will be.

Partial pressure in mbar

Encoders for use in a vacuum

Mass in u
Residual gas analysis of an AK LIC 411 V scanning head with 1 m cable (pumping speed: 107 l/s,pressure: 6 · 10–8 mbar)

To attain the lowest possible outgassing
values, HEIDENHAIN recommends baking
at 100 °C for 48 hours under high vacuum
conditions.
The figure shows the spectrum of theresidual gas analysis of an AK LIC 411 V
scanning head with a 1 m cable and D-subconnector. The scanning head was baked at
100 °C in a high vacuum. The outgassing ofthe linear scale (with fixed-point adhesivebond) was barely measurable or depictable.

4Product Information: LIC 4113V, LIC 4193V   01/2020

Electrical connection
Cables

PUR connecting cables [4 x (2 x 0.09 mm2)]; AP = 0.09 mm2
PUR connecting cables [(4 × 0.14 mm2) + (4 × 0.34 mm2)]; AP = 0.34 mm2¬ 6 mm

¬ 3.7 mm1)

With 8-pin M12 connector (female) and
8-pin M12 coupling (male)1036372-xx

801142-xx

With 8-pin M12 right-angle connector(female) and 8-pin M12 coupling (male)373289-xx

801149-xx

With 8-pin M12 connector (female) and15‑pin D-sub connector (male) for thePWM 20, EIB 74x, etc.

524599-xx

801129-xx

With 8-pin M12 right-angle connector(female) and 15-pin D-sub connector (male)for the PWM 20, EIB 74x, etc.

722025-xx

801140-xx

With 8‑pin M12 connector (female) andstripped cable end

634265-xx–With 8-pin M12 right-angle connector(female) and unstripped cable end606317-xx–1)

Maximum overall length: 6 m
AP: Cross section of power supply lines

Product Information: LIC 4113V, LIC 4193V   01/2020

5

Electrical connection
Pin layout

Connecting cables and pin layouts forFanuc, Mitsubishi, Panasonic, and Yaskawa
can be found in the Exposed LinearEncoders brochure.

EnDat pin layout
15-pin D-sub connector

Power supplySerial data transfer

51271441119UPSensor
UP0VSensor
0VData

Data

CLOCK

CLOCK

Brown/GreenBlueWhite/GreenWhite

GrayPink

VioletYellow

Cable shield connected to housing; UP = Power supply voltage
Sensor: The sense line is connected in the encoder with the corresponding power line.
Vacant pins or wires must not be used!

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1133597 · 02 · A · 02 · 01/2020 · PDF

This Product Information document supersedes all previous editions, which thereby
become invalid. The basis for ordering from HEIDENHAIN is always the ProductInformation document edition valid when the order is made.

Further information:
Comply with the requirements described in the following documents to ensure thecorrect operation of the encoder:• Brochure: Exposed Linear Encoders	 208960-xx• Brochure: Cables and Connectors
1206103-xx• Brochure: Interfaces of HEIDENHAIN Encoders
1078628-xx• Technical Information document: Linear Encoders for Vacuum Technology	  627568-xx