Improve 3D X-ray image
quality and increase scan
speed by 2X
for semiconductor packages
ZEISS OptiRecon
The new ZEISS OptiRecon option for ZEISS Xradia Versa X-ray microscopes (XRM) and Xradia Context microCT enables significantly
faster 3D X-ray image acquisition at any energy setting through an image reconstruction algorithm known as iterative reconstruction.
In addition to speeding up analysis, OptiRecon also can provide better image quality at standard scan speeds. It is well-suited for failureanalysis (FA) and development applications across a wide variety of semiconductor packages.
Up to 2X Faster Scans atreconstructed images. The reduced

Improved Image Quality

Similar Image Quality

number of projections enables significantly

OptiRecon can improve image quality ofOptiRecon produces high-quality images

faster data collection, even when using

full-projection datasets. Identifying small

having high contrast-to-noise ratios. It

low kV settings to maximize image contrast.

defects in a >1 mm volume of data can beallows for fewer projections than theThe ability to see fine features and defects

challenging and requires sharp analyticalconventional reconstruction method

is retained across a broad range ofeyes. High image contrast, high spatial

known as Feldkamp-Davis-Kress (FDK),samples and defect types.

resolution and high signal-to-noise ratios

while achieving similar quality as FDK

all drive the imaging quality. When applied
to full-projection datasets, OptiRecon
reduces noise resulting in images withStandard Reconstruction

OptiRecon

800 projections – 8 hour scan time

800 projections – 8 hour scan time

both high contrast-to-noise and highsignal-to-noise ratios. This improvesdefect visualization, reduces eye
fatigue for the analyst, and increases
FA success rates.

100 µm

100 µm

2.5D package: (L) Standard FDK reconstruction; (R) OptiRecon showing superior image quality with the same numberof projections and scan timeStandard Reconstruction

OptiRecon

800 projections – 8 hour scan time

400 projections – 4 hour scan time

100 µm

100 µm

2.5D package: (L) Standard FDK reconstruction; (R) OptiRecon – 2X faster scan speed with superior image quality

ForwardProjection

1 Iteration

3 Iterations

5 Iterations

7 Iterations

9 Iterations

11 Iterations

ModelProjections
Reconstructed
3D VolumeMultiple
Iterations
Back and forth
Projection

BackProjection

RealProjections

Fast and Efficient
Iterative reconstruction is significantly more computationallyintensive than the standard filtered-back projection techniqueand can require very long reconstruction times.

Set up is accomplished in 4 easy steps:• Select dataset

OptiRecon features a proprietary, efficient implementationthat can achieve reconstruction of a standard dataset of 1024 x
1024 x 1024 voxels from 400 projections in about 5 minutes.
It includes an advanced high-performance offline workstationand easy-to-use interface to optimize reconstruction parameters.
User-friendly
Iterative reconstruction as implemented by other manufacturers
requires a skilled user with expertise to fine-tune the processparameters for each application. The ZEISS workflow-based OptiReconuser interface has easy-to-use parameter tuning that does not
require expertise in tomographic reconstruction techniques.

• Perform standard parameter optimization: center shift,beam hardening• Perform OptiRecon parameter optimization with visual feedback:edge preserving and smoothing (noise reduction)• Reconstruct
OptiRecon is offered via the unique Advanced ReconstructionToolbox for ZEISS Xradia 3D X-ray systems. It is compatible withZEISS Xradia 410, 500- and 600-series Versa 3D XRM and Xradia
Context microCT. ZEISS offers unprecedented system extendibility
with field conversion options and various upgrades like OptiReconto protect your investment.

OptiRecon Module
ZEISS Xradia Versa XRM
with primary workstation
Standard FDK ReconstructionZEISS Xradia
Context microCTwith primary workstation
Standard FDK Reconstruction

microscopy@zeiss.com
www.zeiss.com+Software Bundle

High-performanceOffline Workstation• OptiRecon engine• Dual 10-core processor• Manual Reconstruction• 512GB RAM• XRM DataExplorer• Windows 10, 64-bit O/S• XRM 3DViewer• Dual professional-class
3D GPU• 30” monitor

Not for therapeutic use, treatment or medical diagnostic evidence. Not all products are available in every country. Contact your local ZEISS representative for more information.
EN_44_012_077 | 03-2021 | Design, scope of delivery and technical progress subject to change without notice. | © Carl Zeiss Microscopy GmbH

Iterative reconstructions works by progressively building up a 3D volume over multiple iterations. The volume is then forward projected to create a model set of projections,which are compared with a real projection set. This comparison is used to update the 3D volume so eventually the 3D volume will approach a “best fit” volume with best
matching of the real and created datasets.