For High Purity Chemicals

Specifications

Semicon Cupla
SCS TypeValve structure

Electropolished stainless steel (SUS304)

Size (Thread)

1/8", 1/4", 3/8", 1/2", 3/4", 1"
1/8-27NPT, 1/4-18NPT, 19/32-18UNS

Pressure unitMPa

kgf/cm2

bar

Working pressure

0.22229Socket
O-ringSeal material

MarkWorking
temperature range

Remarks

Perfluoroelastomer

P

0˚C to +50˚CStandard material

Valve

Fluoropolymer resin (Socket: PFA, Plug: PTFE except 1P and 2P of PFA)

Seal material

For semiconductor manufacturing equipment
Working pressure

Body material

Working temperature
range

Applicable fluids

PSI*If you need a seal material other than perfluoroelastomer, please consult with us.

0.2

Max. Tightening Torque

0.2 MPa{2 kgf/cm2}

Two-way shut-off

High purity
chemicals

WaterGas

Air

Adopted stainless steel body andfluorine contained resin valves.
• The body and spring material of stainless steel (SUS304), and valve offluorine contained resin ensure excellent performance with various chemicals.
• Body (SUS304) is electropolished for enhanced corrosion resistance.
• All components are cleaned, assembled, inspected, and then packed in a clean room.
• Grease free. Grease is not applied to the seal material.
• Plug comes with a dust cap.

Nm {kgf • cm}

Size

1/8-27NPT 1/4-18NPT
Rc 1/8Rc 1/419/3218UNS

Rc 3/8Rc 1/2

Rc 3/4Torque9 {92}

20 {204}

22 {224}60 {612}90 {918} 120 {1224}

14 {143}

Rc 1

Interchangeability
The model name {SCS-□S (P)} with the same digit in □ are interchangeable regardless of
end configurations.

Interchangeability Check List (SCS Type, SCY Type)indicates connection capability except for made-to-order products.
SocketSCS Type-2S-1SModelPlug-1S-2SSCY Type-3S-4S-6S-8S-1P-2P-3P-4P-6P-8PSCS
Type(mm2)Min. Cross-Sectional Area
Model

SCS-1SPSCS-2SPSCS-3P

SCS-4P

SCS-6P

SCS-8P

15232871

110

162

Min. cross-sectional area

Flow Rate – Pressure Loss Characteristics[Test conditions]• Fluid : Water• Temperature : 21˚C to 32˚C

Pressure loss in MPa {kgf/cm2}

1.0 {10}0.1 {1}
SCY-1S x SCS-1PSCS-1S x SCS-1PSCY-2S x SCS-2P
SCS-2S x SCS-2P
SCY-3S x SCS-3P
SCY-4S x SCS-4P
SCY-6S x SCS-6P
SCY-8S x SCS-8P

0.01 {0.1}0.001 {0.01}
1101001000

Flow rate in L/min
Semiconductor manufacturing equipment

Models and Dimensions

Plug

WAF : WAF stands for width across flats.

Female thread

SocketFemale thread

TDT

H
Model

SCS-1P
SCS-1P-NPT
SCS-1P-UNS
SCS-2PSCS-2P-NPT
SCS-2P-UNS
SCS-3P
SCS-4P
SCS-6P
SCS-8PC

Container
capacity

For 10L to 20L
For 10L to 20L
For 10L to 20L
For 10L to 20L
For 10L to 20LFor 10L to 20L
For 100L to 200L
For 100L to 200L
For 100L to 200L
For 100L to 200L

HLL
Mass (g)Dimensions (mm)LC

H(WAF)

1729

19

Hex.14

34
32
29
41
61
114
198
338

33

19

Hex.21

34

22

Hex.17

36
40
44
52
62

22
25
28
36
40

Hex.21
Hex.21
Hex.29Hex.35
Hex.41T
Rc 1/8
1/8-27NPT
19/32-18UNS
Rc 1/4
1/4-18NPT
19/32-18UNS
Rc 3/8Rc 1/2
Rc 3/4
Rc 1

Model

SCS-1S-NPT
SCS-2S-NPT

Container
capacity

Mass (g)For 10L to 20L
For 10L to 20L

84138

Dimensions (mm)L
48
58

øD
24
28

H(WAF)
1419

T
1/8-27NPT
1/4-18NPT

Before use, please be sure to read “Safety Guide” described at the end of this book and “Instruction Sheet” that comes with the products.

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