Since the start of operations at the main plant in Taiwa-cho in October 2011, Tokyo Electron Miyagi has Grown to offer
state-of-the-art manufacturing capabilities to its customers, practicing the Tokyo Electron Group's corporate philosophy of“contributing to the development of a dream-inspiring society through our leading-edge technologies and reliable service andsupport.”
Semiconductor technology is constantly advancing to support society’s digitalization and decarbonation. The market for etchsystems, where Tokyo Electron Miyagi is thriving, is expected to continue to grow significantly in the future, as technologicalinnovation continues along with the advancement of semiconductor microfabrication technology.
Under the mission of creating and maximizing customer value we care for people and the earth and remain committed totechnological advancement. We will constantly seek to strengthen our core technology and to develop cutting-edge
technologies by using a combination of the TEL Group's unique, competitive technologies and leveraging the power of organic
collaboration based on mutual trust with our partners, joint research with consortiums and academic institutions, and otherstakeholder support and collaboration. We at Tokyo Electron Miyagi all unite to take on new technological and manufacturing
challenges ,and deliver quality products and services with speed and integrity to contribute to the development of society andthe local community, while having a strong ambition to grow our business from Miyagi to the world.
We would appreciate your continued warm support.

Hiromitsu Kambara
Presidnet&Representative Director
Tokyo Electron Miyagi Ltd.

CORPORATE DATA● Tokyo Electron Miyagi Ltd.

: July 1, 2010
Established: 500 million yen
Capital
Number of employees : 1,842 (as of April 1, 2023)● Head Office〒981-3629
1 Techno-Hills, Taiwa-cho, Kurokawa-gun, Miyagi 981-3629
Tel : +81-22-346-3000

Head Office● Matsushima Office

1-1 Nekohazama Nemawari Matsushima-machi,Miyagi-gun, Miyagi 981-0203
Tel : +81-22-346-3000● Fujii Office2381-1 Kitagejo, Fujii-cho
Nirasaki City, Yamanashi 407-8511
Tel : +81-551-22-8611
Head Office: Miyagi Technology Innovation Center

BUSINESS DESCRIPTION
Etch System
Tokyo Electron Miyagi develops and manufactures plasma etch systems used tomanufacture semiconductor devices.
This plasma etch system series removes an unwanted patterns of semiconductor material
from the wafer surface by using etching gas in a plasma state in the reaction chamber ofthe system, enabling ultra-fine fabrication. It can fabricate semiconductor devices from ataround one nanometer (one millionth of a millimeter) to one micrometer (one thousandthof a millimeter) and support a wide range of applications such as DRAM, NAND Flash andother cutting-edge memory devices, logic devices (CPU, etc.), and power semiconductor devices.
Our etch systems are highly recognized for their excellent cost and highly reliableperformance in the grobal market.
Facing an increasing demand for further miniaturization and multi-layering ofsemiconductors, the plasma etch system market is expected to grow further in the future.
We will continue to deliver products demanded by the market in a timely manner.
Going above and beyond cutting-edge technologies, our plasma etch systems continue toevolve in the future.

Please visit www.tel.com for more information.

Plasma Etch System

TactrasTM

EpisodeTM UL

2023.09
PR3 61-0189