MMC Activities

The 10th International Micromachine / Nanotech Symposium
industry creation”, presented by Prof. Susumu Sugiyamaof Ritsumeikan University. The input/output of LSI – thedevelopment of which enabled the realization of today’s
information society - is limited by electronic signals;
MEMS, however, has the potential to input/output adiversity of signals - electronic, mechanical, optical,magnetic, chemical, and even biological. By combining
MEMS with the remarkable technological innovation thatis nanotechnology, it is anticipated that this field willbring about tremendous dreams for human society.

The 10 t h International Micromachine / Nanotech
Symposium, subsidized by the Japan Motorcycle Racing
Organization and supported by METI and NEDO, washeld on November 11 (Thursday), 2004, at the Science
Museum in Kitanomaru Park, Tokyo. The themes for thissymposium were “Micromachine technology for safe andsecure advanced information societies”, “New MEMS/systems and technology”, and “Policy trends of MEMS
research and development”; 15 lectures were presented
by invited speakers, 4 from overseas and 11 from within
Japan. The symposium welcomed 359 participants
altogether, including general attendees from both within
Japan and overseas, speakers, invited guests, andmembers of the media. This number represents anincrease of more than 20% over last year’s attendance
and includes the highest number of participants fromwithin Japan to date. The symposium was a roaring
success, with morning sessions in particular so packed
there was barely standing room.

In Session 2, “Micromachine technology for safe andsecure advanced information societies”, speakers activeat the forefront of the commercialization of cars,
information equipment, and medical equipment
presented lectures on the relationship between MEMS
and these various products. Brimming as these productfocused lectures were with practicality, the alreadyoverflowing lecture hall took on an added air ofexcitement. Today micromachine (MEMS) technology isa key technology supporting a safe and secure highly
information-orientated society. Thanks to MEMS
technology and nanotechnology, such innovations as theultimate safe car; the impressively creative, ultimate
computer display; and the safe, reassuring, highlyefficient, ultimate therapeutic capsule endoscope are nolonger dreams.

In Session 1, “Opening”, an opening address was given
by Dr. Tamotsu Nomakuchi, Chairman of theMicromachine Center, followed by a guest speech by Mr.
Yoshinori Komiya, Director of the Industrial Machinery
Division, Manufacturing Industries Bureau, METI. Thiswas followed by a special lecture entitled “New progressof integration and fusion in MEMS – expectations for new2

market from 450 billion today to 1.35 trillion in 2010 andanother on the METI/NEDO MEMS design and analysis
support system development project (MEMS-ONEProject) - launched in an industry-academia consortiumby the Micromachine Center – that highlighted theactivities of the Micromachine Center. Furthermore, alecture on systematic approaches in material researchnecessary to MST (Micro System Technology), launchedby a European industry-academia consortium showed
how global R&D is progressing overseas also.

Session 3, “New MEMS/ systems and technology”,
began with 3 lectures (2 by speakers from overseas and 1
by a speaker from within Japan) on the relationshipbetween ubiquitous networks and MEMS. These werefollowed by 2 lectures (1 each by speakers from overseasand within Japan) on the application of MEMS inbiomedicine. Various other lectures on timely topics werepresented, including the smart skin for turbulence confrd
insplred by dolphins skin, the integrated MEMS thatexamined the example of infrared image sensors, and thenanoimprinting technology. which enables micro andnano machining innovations with a view to moving awayfrom the semiconductor process. From these it is clearthat MEMS can potentially be applied and expanded in avast array of fields. However, for this to be realized, R&D
of new production technologies that considers cost
reductions is also an important challenge for the future.

Lasting from just after 9:00 a.m. until 6:00 p.m., thelong program packed in 15 lectures, beginning with thespecial lecture, and the lecture hall was filled with an airof excitement. A sense of the enormity of the potential of
micromachines and MEMS, and tremendous expectations
for their future was palpable. Responses to thesymposium included many favorable comments fromparticipants, such as “I was able to learn about new
trends and could see the direction in which
commercialization is heading” and “MEMS-ONE is ahighly desirable experiment; I hold high expectations forit,” and some of the information presented in lectures wastaken up and reported favorably by the media. Thanks tothe efforts of our speakers, both from within Japan andoverseas, who presented such topical information, and of
the members of the program committee, who worked so
hard to organize the program, this year’s symposium wasa resounding success.
The next symposium, The 11 t h International
Micromachine / Nanotech Symposium, is planned for
November 10 (Thursday), 2005, again at the Science
Museum in Kitanomaru Park, Tokyo (located near theImperial Palace), in conjunction with The 16 t h
Micromachine Exhibition.

Session 4, “Policy trends of MEMS research anddevelopment” featured such lectures as one on market
trends for MEMS that showed an expansion of the MEMS

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