PC2E-0380

14

Consolidating four
detectors into asingle unit cuts costs
dramatically.
Cost reductions
Dramatically reduces costs.

Advanced pumpFeatures high performance pump.

Smart sensor

Equipped with smart self-diagnostic functions

Connectivity
Ethernet (PoE) support

Multi Gas Detector For Semiconductor Factories

MODEL

GD-84D-EX Series
CE marking compliant

A Gas Detector with
Stunning Innovations
GD-84D-EX Series Features
Cost reductions
Dramatically reduces costs.

Advanced pumpFeatures high performance pump.

Smart sensor

Equipped with smart self-diagnostic functions

ConnectivityEthernet (PoE) support

one!

Replacing four units
withThe GD-84D-EX Series is ﬁtted with newly
developed advanced next generation sensors
with enhanced self-diagnostic functions.

By consolidating four gas detectors
in a single unit we seek to achieve improved
safety and security while reducing costs.

Full-dot LCD for legibility! Simultaneous four-component display
Gas name display

Alarm setpoint
display

Designed for easy replacement
GD-70D
mounting

Power lamp
1st alarm lamp
2nd alarm lamp
Fault alarm lamp

Concentration
display
Concentration
bar displayUnits display

MODE key▲ key

Wall mounting unit for GD-70D▼ key

Four holes (marked red on the ﬁgure) on theGD-70D wall mounting unit allow mounting.

TEST/SET key

Flow rate
display
Communications
display

Maintenance indicator

SHIFT key

GD-84D-EX
mounting

Wall mounting unit forGD-84D-EX

Cost reductions

Dramatic cost reductions compared to preceding models● Reduced pipe installation costs
In previous models, each individual gas detector required gas
inlet and outlet pipes. The GD-84D-EX reduces pipework andcorresponding installation costs by up to 75 %.
* With all four sensors installed● Reduced wiring installation costs
Using the GD-84D-EX (PoE model) in conjunction with a PoE hub
makes it possible to reduce both power and communication wiring
installation costs and numbers of hub ports by up to 75 %.
* With all four sensors installed
8 ports

8 in/out pipes

Exhaust duct

Sampling

tube

2 ports

2 in/out pipes

Exhaust duct

Sampling

PoE hutubeb

PoE huVia Ethernet to● Reduced installation space requirements
Combining the equivalent of four detectors cuts rack installation spacerequirements in half.
* With all four sensors installedbmonito

ring system

PoE hub● Reduced consumables costs
Reduces replacement requirements for consumables such as
pumps and dust ﬁlters by 75 %.
Also reduces replacement costs by 75 %.
Requires replacement of four sets.

×4

Pump

Dust ﬁlter

Replace just one set.
Pump

Half thespace
Dust ﬁlter

Advanced pumpFeatures high performance pump.
New!
Model: RP-80
Previous
model
Model: RP-70

Reduced vibration

Reduced noise

Two diaphragms to cancel vibration

Revised valve conﬁgurationSurge prevention

Redundancy

Buﬀer provided inside chamber

Twin pump → Suction possible evenwith one failed pump

Smaller environmental footprint
Eliminates adhesives and bolts (andnuts) for easier recycling.

Smart sensor

Equipped with smart self-diagnostic functions
The next generation F Series highperformance sensors feature signiﬁcantly
improved self-diagnostic functions. (Seetable at right.) In addition to sensor types
for the 18 diﬀerent major toxic gases, thelineup includes gas sensors for 67 distinct
combustible gases. Despite being 1/10 thesize of previous sensors, the new sensors
oﬀer equivalent or superior interferenceresistance.

Self-diagnostic functions
Function
Service life expiration
warning

Degradation diagnosticwarning(sensor output abnormality)
Degradation diagnosticwarning(ﬂuid shortage detection)
Life assessment warning
Vitality(span reserve)

Sensor lineup

Electrochemicaltype

Electrochemicaltype(For oxygen)

Applicableprinciples
All
principles

Details
An alarm is issued after three years from the start of use. * May diﬀer
depending on sensor.

NCF
SHF
SGF

An alarm is issued when the value of the drift from the initial sensor
output (in air) exceeds a threshold.

ESF

An alarm is issued when the ﬂuid resistance between electrodes
exceeds a threshold.

All
principles

An alarm is issued when the span reserve estimated based on thecalibration history approaches zero.

All
principles

The sensor reserve is displayed when a known concentration of gas isallowed to ﬂow.

Hot-wiresemiconductor
type

Semiconductor
type

New ceramic type

Connectivity
Ethernet (PoE) support●Ethernet
The PoE HUB allows power supply via LAN cable, signiﬁcantly reducing installation
costs. It also allows operators to view the operational status of the detector via a
web browser.
[User mode]
Enables checking/review of basic informationsuch as gas names and alarm setpoints, as well as
alarm history and communication history.

●Analog 4 - 20 mA DC
Gas concentration data is output via a general
instrumentation signal (4 - 20 mA DC). This allows
greater ﬂexibility in system conﬁguration.

Pattern 1

MULTI GAS DETECTOR

POWER ALM1 ALM2 FAULT

MODETESTSETSHIFT

GD-84D-EX[Administrator mode]
Apart from check basic data, you can also change
settings for alarm setpoint values or the network,
run calibrations, alarm tests and fault alarm tests,
reset alarms, and set INHIBIT.

Indicator/alarm unit

Detector
GD-84D-EX

Pattern 2PC

GD-84D-EX(Ethernet model)

PLC

PC

Switching hub (PoE)

MULTI GAS DETECTOR

POWER ALM1 ALM2 FAULT

MODE

TEST
SET

SHIFT

GD-84D-EX
MULTI GAS DETECTOR

POWER ALM1 ALM2 FAULT

MODE

TEST
SET

SHIFT

GD-84D-EX

Ethernet cableLineup overview
Model

GD-84D-EX-ET-EC

GD-84D-EX-ET

GD-84D-EX-EA-EC

GD-84D-EX-EA

GD-84D-EX-EC

GD-84D-EX

Communication method

Ethernet only

Ethernet only

Combined Ethernet/4 - 20 mA

Combined Ethernet/4 - 20 mA

4 - 20 mA only

4 - 20 mA only

EC only

Possible sensors

Also compatible with sensors other than EC
EC only

Also compatible with sensors other than EC

EC only

Also compatible with sensors other than EC

Monitoringsystem

Power input

PoE only

PoE only

Combined PoE/24 V DC

Combined PoE/24 V DC

24 V DC

24 V DC

Detector
GD-84D-EX

Lineup of main gases[Detection principle: electrochemical type (ESF)]
Gas name

Measurement
range

Alarmsetpoints

ACGIH
Acceptableconcentration

No.

Sensormodel

Gas name

Display
name

ESF-A24A

Nitrogen dioxide

NO20 - 15 ppm

5 ppm

0.2 ppm1

SHF-8601

Fluoromethane(CH3F)ACGIH
Measurement
Alarm setpoints Acceptable
range
concentration

R-41

0 - 2,000 ppm

500 ppm
1,000 ppm−

ESF-A24E2

Hydrogen chlorideHCL

0 - 6 ppm

2 ppm

2 ppm

2

SHF-8601

Diﬂuoromethane(CH2F2)R-32

0 - 2,000 ppm

500 ppm
1,000 ppm

−Isopropyl alcoholIPA

0 - 2,000 ppm

500 ppm
1,000 ppm

200 ppm

0 - 2,000 ppm

500 ppm
1,000 ppm

−0 - 2,000 ppm

500 ppm
1,000 ppm

−No.
1
234

[Detection principle: hot-wire semiconductor type (SHF)]

Display
nameSensormodel

ESF-B242

Ammonia

ESF-B24A

Chlorine

NH3
CL20 - 75 ppm
0 - 0.3 ppm

25 ppm0.1 ppm

25 ppm30.1 ppm

5

ESF-X24P2

OxygenO20 - 25 %

18 %

6

ESF-A24D

Phosphine

PH30 - 1 ppm

0.3 ppm

0.05 ppm

7

ESF-A24D

Silane

SiH40 - 15 ppm

5 ppm

5 ppm

8

ESF-A24D

DisilaneSi2H60 - 15 ppm

5 ppm−9ESF-A24D

Sulfur dioxide

SO20 - 6 ppm

2 ppm

0.25 ppm

10ESF-A24D2

Nitrogen monoxide

NO0 - 100 ppm

25 ppm25 ppm11

ESF-A24E2

Hydrogen bromide

HBr

0 - 6 ppm

2 ppm

2 ppm

12

ESF-B241

Diethylamine

DEA

0 - 15 ppm

5 ppm

5 ppm

13

ESF-B241

Dimethylamine

DMA

0 - 15 ppm

5 ppm

5 ppm

14

ESF-B241

Ethylmethylamine

EMA

0 - 15 ppm

5 ppm

5 ppm

15

ESF-B248

Fluorine

F20 - 3 ppm

1 ppm

0.1 ppm

16

ESF-B248

Hydrogen ﬂuoride

HF0 - 1.5 ppm

0.5 ppm

0.5 ppm

17

ESF-B249

Ozone

O30 - 0.6 ppm

0.2 ppm

0.2 ppm(<2 h)

18

ESF-B24A

Chlorine triﬂuoride

CLF30 - 0.3 ppm

0.1 ppm

0.1 ppm4−

5

SHF-8601
SHF-8603
SHF-8603

Deuterium
Hydrogen

D2
H2[Detection principle: semiconductor type (SGF)]
No.

Sensormodel

Gas name

Displayname

ACGIH
Measurement
Alarm setpoints Acceptable
range
concentration

1

SGF-8581

MethaneCH40 - 2,000 ppm

500 ppm
1,000 ppm

−0 - 2,000 ppm

500 ppm
1,000 ppm

5 ppm

2SGF-8562

Carbonyl sulﬁdeCOS[Detection principle: new ceramic type (NCF)]
No.
1SensormodelGas name

NCF-6318

Methane

Display
nameMeasurement
Alarm setpoints
range

CH40 - 100 %LEL

5.0 vol%
4.0 vol%
2.0 vol%2

NCF-6320

HydrogenH20 - 100 %LEL

25 %LEL
50 %LEL3

NCF-6319

Isopropyl alcoholIPA

0 - 100 %LEL

25 %LEL
50 %LEL* Certain restrictions apply regarding sensor combinations. For more information, contact RIKEN
KEIKI.
* Refer to “TLVs and Bels 2020” for concentrations accepted by the ACGIH (American Conferenceof Government Industrial Hygienists).
* For more information on other gases, contact RIKEN KEIKI.

[Combined Ethernet and 4 - 20 mA: GD-84D-EX/GD-84D-EX-EC/GD-84D-EX-EA/GD-84D-EX-EA-EC]
140

M4 mounting holes

146

150

40

Display

149

190

Operatingswitches

64.4

M4 mounting holes GAS IN（ODø-t1）GAS OUT（ODø-t1）[Ethernet only: GD-84D-EX-ET/GD-84D-EX-ET-EC]
140

150

9

M4 mounting holes

Display74

Operatingswitches
183

138
110

GAS IN（ODø6-t1）

LEL

25 %LEL
50 %LELGAS OUT（ODø6-t1）

Model GD-84D-EX Speciﬁcations
Model

GD-84D-EX

GD-84D-EX-EC

GD-84D-EX-EA

GD-84D-EX-EA-EC

GD-84D-EX-ET

GD-84D-EX-ET-EC

Detection principle

Electrochemical type
Semiconductor typeNew ceramic typeHot-wire semiconductor
typeElectrochemical type

Electrochemical type
Semiconductor typeNew ceramic typeHot-wire semiconductor
typeElectrochemical type

Electrochemical type
Semiconductor typeNew ceramic typeHot-wire semiconductor
typeElectrochemical type

Detection target gas

Toxic gases, combustible
gases

Toxic gases

Toxic gases, combustible
gases

Toxic gasesToxic gases, combustiblegases

Toxic gases

Display

Full-dot display (gas name/ﬂow rate/mode/communication status/gas concentration/bar meter)

Detection method

Pump suction type

Suction ﬂow rate

Total ﬂow rate: approx. 0.6 L/min

Power supply indication

POWER lamp lit (green)

Alarm accuracy(for identical conditions)
Alarm delay(for identical conditions)

Within30 % of alarm setpoint* When providing gas within 60 seconds at 1.6 times the alarm setpoint (not including piping delay and communication delay)

Gas alarm typeTwo-stage alarm (H-HH, L-H, or L-LL)

Gas alarm indication

1st: ALM1 lamp lit (red), 2nd: ALM2 lamp lit (red)Gas alarm pattern
Gas alarm contact
Fault alarm/self-diagnosis

Auto-reset or self-latching

No-voltage contact 1a or 1b, always de-energized (energized in alarm state) or always energized(de-energized in alarm state)

Fault alarm indication

FAULT lamp lit (yellow)/detail display

Fault alarm pattern

Auto-reset or self-latching

Overall fault contacts: No-voltage contact 1a or 1b, always de-energized(energized in alarm state) or always energized (de-energized in alarm state)

Fault alarm contacts
Contact capacity
Contact cable
External output

External output cable―

24 V DC / 0.5 A (resistance load)―

CVV or equivalent cable (1.25 mm2, up to 18 cores)―

Analog transmission:2-wire analog transmission(4 - 20 mA DC, non-insulated,resistance load 300 Ω or less,including cable resistance)
Analog transmission: CVVS or equivalent shieldedcable (1.25 mm2, maximum
eight cores)

FunctionsPower cable―

System, sensor, ﬂow, communications, fan disconnection, or temperature increase anomaly; sensor life assessment

Digital transmission: Ethernet (10BASE-T/100BASE-TX)
Analog transmission: 2-wire analog transmission (4 - 20mA DC, non-insulated, resistanceload 300 Ω or less, including cableresistance)

Digital transmission: Ethernet (10BASE-T/100BASE-TX)

Digital transmission: Cat5e or better Ethernet cable
Analog transmission: CVVS or equivalent shieldedcable (1.25 mm2, maximum
eight cores)

Digital transmission: Cat5e or better Ethernet cableWhite backlight, alarm delay, suppression, zero follower, sensitivity correction, ﬂow control, calibration history, alarm trend history, event history
CVV or equivalent cable (1.25 mm2) 2-core

Power source

24 V

CVV or equivalent cable (1.25 mm2) 2-core(Shared with digital transmission cable when PoEconnection is used)

10 % DC24 V

Shared with digital transmission cable

10 % DC or PoE+ connection

PoE+ connection

When 24 V DC is connected: When 24 V DC is connected: When 24 V DC is connected: approx. When 24 V DC is connected: approx. When PoE+ is connected:
9 W (maximum approx. 15 W)
3 W (maximum approx. 8 W)
approx. 9 W
Power consumption
approx. 8 W
approx. 2.5 W
When PoE+ is connected: approx. 11 When PoE+ is connected: approx.
(maximum approx. 11 W)(maximum approx. 14 W)(maximum approx. 7 W)
W (maximum approx. 16 W)
4.5 W (maximum approx. 9.5 W)
Pipe connection
openings

Rc1/4 (OD ø6-1t half union for Teﬂon pipe (PP) supplied)

Initialization
Operating temperature
range
Operating humidity
range

When PoE+ is connected:approx. 3.5 W(maximum approx. 4.5 W)

Approx. 25 seconds-10 to +40 °C (no sudden ﬂuctuations)
20 - 90 %RH (No condensation; may depend on the sensors installed.)

Construction

Wall mounting type

External dimensions

Approx. 150 mm (W) × 190 mm (H) × 146 mm (D) (excluding projections)

WeightApproximately 1.9 kg

Exterior color

Printed in Japan

Approx. 150 mm (W) × 183 mm (H) × 140 mm (D)(excluding projections)
Approximately 1.4 kg

Main unit: Black/Front door: White★ Distributed by:

2 -7-6 Azusawa, Itabashi-ku, Tokyo 174 - 8744, Japan

Phone : +81-3-3966-1113
Telefax : +81-3-3558-9110E-mail : intdept@rikenkeiki.co.jp
Web : https://www.rikenkeiki.co.jp/english* The contents described in this catalog are
subject to change without notice according to theperformance improvement.

T
PC2E-0380-210800