1 / 11 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES13
Ｓ４Ｆ（Ａ，Ｂ）

SAFETY DATA SHEET
rev. 8.0

SECTION 1

2013/10/16
2024/3/15

Chemicals and company identification

Product name

Ｓ４Ｆ（Ａ，Ｂ）

Product code

ES13

Company nameCANON OPTRON INC.

Address

1744-1, Kanakubo, Yuki-shi, Ibaraki-ken, 307-0015 Japan

Section nameSales Department

Telephone number+81-296-21-3700

Fax number+81-296-21-3770

Emergency telephone tumber+81-296-21-3700

Use

Vacuum deposition material

SECTION 2

Date of Issue
Revised Date

Hazards identification

GHS Classification （A classification by JIS Z 7252 "classification methods such as chemical substances based on GHS"）
Physical hazards

Health hazards

Explosives

Classification not possible

Flammable gases

Not applicable

Aerosols

Not applicable

Oxidizing gases

Not applicableGas under pressure

Not applicable

Flammable liquids

Not applicable

Flammable solids

Classification not possible

Self-reactive substances and mixtures

Classification not possible

Pyrophoric liquids

Not applicable

Pyrophoric solids

Classification not possible

Self-heating substances and mixtures

Classification not possible

Substances and mixtures which,incontact with water,emit flammablegases

Classification not possible

Oxidizing liquids

Not applicable

Oxidizing solids

Classification not possible

Organic peroxides

Classification not possible

Corrosive to metals

Classification not possible

Desensitize explosives

Classification not possible

Acute toxicity(oral)

Classification not possible

Acute toxicity(dermal)

Classification not possible

Acute toxicity (Inhalation: Gases)

Not applicable

Acute toxicity (Inhalation: Vapors)

Classification not possible

2 / 11 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES13
Ｓ４Ｆ（Ａ，Ｂ）

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

Acute toxicity (Inhalation: Dusts andmists)Classification not possible

Skin corrosion/irritation

Classification not possible

Serious eye damage/eye irritation

Classification not possible

Respiratory sensitization

Classification not possible

Skin sensitization

Classification not possible

Germ cell mutagenicity

Category 2

Carcinogenicity

Category 1A

Reproductive toxicity

Classification not possible

2013/10/16
2024/3/15

Reproductive toxicity, effects on or via Classification not possible
lactation

Environmental hazards

Specific target organ toxicity(single
exposure)Classification not possible

Specific target organ toxicity(repeatedexposure)

Category 1

Aspiration hazard

Classification not possible

Hazardous to the aquatic environment
Short-term(acute)Classification not possible

Hazardous to the aquatic environmentLong-term(chronic)

Classification not possible

Hazardous to the ozone layer

Classification not possible

Label elements
hazard Pictograms

Health Hazard

健康有害性Signal word

DangerDangerous goods hazard
information

Suspected of causing genetic defects.
May cause cancer.
Causes damage to organs through prolonged or repeated exposure Respiratory
system,Immune system,Kidneys.

Precautionary statements【Safety measures】

Obtain special instructions before use.
Do not handle until all safety precautions have been read and understood.
Do not breathe dust/fume/gas/mist/vapours/spray.
Wash hands thoroughly after handling.
Do not eat, drink or smoke when using this product.
Wear Protective glovess/protective clothing/eye protection/face protection.

【First-aid measures】

If exposed or concerned：Get medical advice/attention.
Get medical advice/attention if you feel unwell.

3 / 11 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES13
Ｓ４Ｆ（Ａ，Ｂ）

SAFETY DATA SHEET
rev. 8.0

SECTION 3

Date of Issue
Revised Date

【Storage】

Store locked up.

【Disposal】

Dispose of contents/container in accordance with national regulations.

【Other hazards】-

Composition/information on ingredients

Substance/Mixture

MixtureChemical name

QuartzAluminum oxide

Chemical formula

SiO2 (Quartz)

Al2O3

Concentration or concentration
range

SiO2 ： 94- 96%
Al2O3 ： 4- 6%
Total = 100%

CAS No.

14808-60-7

1344-28-1

TSCA Inventry

Quartz (SiO2)

Aluminum oxide (Al2O3)EINECS number

238-878-4

215-691-6

Radioactive information

Radioactive substances are not used as the material. Therefore, there is no
reason that ionizing radiation would be generated.

SECTION 4

First aid measures

Inhalation

Remove person to fresh air and keep comfortable for breathing.
Get medical advice/attention if you feel unwell.

Skin contact

Take off immediately all contaminated clothing. Rinse affected areas withwater/shower.
IF ON SKIN：Wash with plenty of soap and water.
If skin irritation or rash occurs: ：Get medical advice/attention.

Eye contact

Rinse cautiously with water for several minutes.Remove contact lenses, if
present and easy to do. Continue rising.
If eye irritation persists：Get medical advice/attention.

Ingestion

Rinse mouth.
Get medical advice/attention.

Most important symptoms andeffects, both acute and delayed

No data available

Protection of first aiders

Rescuers, wear suitable protective equipment as the situation demands.

Special precautions for physicians

No data available

SECTION 5

Firefighting measures

Suitable extinguishing media

This product itself is not flammable.

Unsuitable extinguishing media

No data available

Specific hazards

No data available

2013/10/16
2024/3/15

4 / 11 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES13
Ｓ４Ｆ（Ａ，Ｂ）

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

2013/10/16
2024/3/15

Specific extinguishing methods

In the case of a fire in the periphery, the portable container is quickly moved to asafe place.

Special protective equipment for
firefighters

Wear suitable protective equipment (gloves, glasses and a mask) in fire-fighting.

SECTION 6

Accidental release measures

Personal precautions, protective
equipment, and emergency
proceduresProtection equipment (specified as those in which the properties of the productare suitable) worn during operation so that airborne droplets, etc., do not adhere
to the skin and dusts and gases are not absorbed.

Environmental precautions

The leakage may not directly flow into rivers or sewage.

Methods and material forcontainment and cleaning up

The leaked material is scooped up, or swept up and gathered to be recovered ina paper bag or a drum.
After recovery, a small amount of the residue is absorbed in sediment, sawdust,
etc.

Secondary disaster prevention
measures

No data available

SECTION 7

Handling and storage

Precautions for safe handlingTechnical measures

Take measures for equipment as described in “8. Exposure controls/personal
protection” and wear protective equipment.

Safety handling precautions

Handling work must be practiced in a room where there is a local or total
ventilation facility.

Avoidance of contact

Refer to “10. Stability and reactivity.”

Hygiene measures

Wash hands thoroughly after handling.
Do not eat, drink or smoke when using this product.

Conditions for safe storage,
including any incompatibilities

SECTION 8

Safe storage conditions

Store locked up.

Safety packaging material

No data available

Exposure controls/personal protection
SiO2 (Quartz)

Al2O3

TLV-TWA: 0.025 mg/㎥ (respiratory
fraction)(a crystalline silica, α-quartz andcristobalite)(2015 version)

TWA 1 mg/㎥(R),STEL -Permissible concentration
ＡＣＧＩＨ

5 / 11 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES13
Ｓ４Ｆ（Ａ，Ｂ）

SAFETY DATA SHEET
rev. 8.0

Appropriate engineering controls

Date of Issue
Revised Date

2013/10/16
2024/3/15

Use sealed devices, equipment, or a local exhaust ventilation as much as
possible.

Individual protection measures,such as personal protective
equipment

SECTION 9

Respiratory protection

Dustproof mask

Hand protection

Protective gloves

Eye/face protection

Dust-proof glasses

Skin protection

Protective clothing

Physical and chemical properties

Appearance
Physical state

Solid

Form

Pellets, granules

Colour

White

Odour

None

SiO2 (Quartz)

Al2O3

Melting point/freezing point

1610℃

2072℃

Boiling point or initial boiling point
and boiling range

2230℃

2980℃

Flammability

No data available

No data available

Upper/lower flammability or
explosive limits

Noninflammability (ICSC (2010))

No data available

Flash point

Noncombustibility

Noncombustibility

Auto-ignition temperature

Noncombustibility

Noncombustibility

Decomposition temperature

No data available

No data available

pH

No data available

No data available

Kinematic viscosity

No data available

No data available

Water

Insoluble

Insoluble

Other solvents

No data available

The slightly soluble in non-polar organic
solvent

Partition coefficient: noctanol/water

No data available

No data available

Vapour pressure

0 mmHg (20℃) (HSFS (2015))

0.073Pa (mp.)

Density and/or relative density

No data available

3.97

Solubility（Density）※ 1.3 ~ 1.9 (pellet) as S4F (A, B)

6 / 11 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES13
Ｓ４Ｆ（Ａ，Ｂ）

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

2013/10/16
2024/3/15

Relative vapor density

No data available

No data available

Particle characteristics

No data available

No data available

Other information

No data available

No data available

SiO2 (Quartz)

Al2O3

Reactivity

No data available

No data available

Chemical stability

No data available

Stability

Possibility of hazardous reactions

It produce alkali hydroxide, hydrogen
fluoride, hydrofluoric acid and a dangerous
reaction.

Possibility of hazardous reaction is
negligible.

Conditions to avoid

No data available

Generation of dust, diffusion.

Incompatible materials

No data available

Not applicable

Hazardous decomposition products No data available

Not applicable

SECTION 10

SECTION 11

Stability and reactivity

Toxicological information
SiO2 (Quartz)

Al2O3

Acute toxicity(oral)

No data available

SPECIES: Rat
ENDPOINT: LD50
VALUE: > 5000 mg/kg

Acute toxicity(dermal)

No data available

No data available

Acute toxicity （Inhalation: Gases）

Solid (GHS definition)

Solid (GHS definition)

Acute toxicity （Inhalation:
Vapours）

Solid (GHS definition)

No data available

Acute toxicity （Inhalation: Dusts
and mists）

No data available

No data available

Skin corrosion/irritation

No data available

No data available

Serious eye damage/irritation

No data available

No data available

Respiratory or skin sensitization

No data available

No data available7 / 11 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES13
Ｓ４Ｆ（Ａ，Ｂ）

SAFETY DATA SHEET
rev. 8.0

Germ cell mutagenicity

Date of Issue
Revised Date

2013/10/16
2024/3/15

As for in vivo, an hprt gene mutation test
The in vivo mutagenicity test has not beenwith alveolar epithelial cells of rats dosed by carried out, and in the in vitro mutagenicity
intratracheal instillation was positive, an hprt test, we could only find the Ames test
gene mutation test with the lung tissue of(negative). Therefore we presupposed thatmice was negative though the method of
we could not classify it for the lack of data.
administration was not specified, amicronucleus test with mice dosed
intraperitoneally was negative, achromosomal aberration test and a sister
chromatid exchange test with human
lymphocytes were positive though exposure
methods were not specified, oxidative DNA
damage tests with the lung and peripheral
blood of rats were positive or negative, andDNA strand break tests with the epithelial
lung cells of rats were positive (SIDS (2013),
CICAD 24 (2000), DFGOT Vol. 14 (2000),
IARC 68 (1997)). As for in vitro, mammaliancell gene mutation tests gave positive andnegative results, micronucleus tests withmammalian cultured cells gave positive andnegative results, and chromosomal
aberration tests and sister chromatid
exchange tests with mammalian cultured
cells were negative (SIDS (2013), CICAD 24(2000), DFGOT Vol. 14 (2000), IARC 68(1997)). From the above, this substance wasclassified in Category 2 in accordance with
the GHS classification guidance for theJapanese government. Besides, thegenotoxicity of this substance is thought to
be attributable to reactive oxygen species
derived from this substance or from theinflammatory cells caused by this substance(SIDS (2013), IARC 100C (2012)).

8 / 11 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES13
Ｓ４Ｆ（Ａ，Ｂ）

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

Carcinogenicity

In the results of many epidemiologicalNot classified because of "Astudies, a positive correlation between
occupational exposure to crystalline silica
containing this substance (quartz) and anincreased risk of lung cancer was found.
Also, in particular, even when the results ofmultiple studies were pooled, and different
meta-analyses were conducted, a significant
increase in the relative risk was shownconsistently (IARC 100C (2012), SIDS
(2013)). Accordingly, it is described that
there is sufficient evidence for an increased
risk of lung cancer in humans by inhalation
exposure to crystalline silica dust with theshape of this substance (quartz) (IARC 100C
(2012)).
Meanwhile, in experimental animals, in a 2year test in which female and male rats were
exposed by inhalation to 1 mg/㎥ of thissubstance (mass median aerodynamic
diameter (MMAD): 1.3 micrometers), and in a
83-week test in which female rats were
exposed by nose inhalation to 12 mg/㎥ ofthis substance (MMAD: 2.24 micrometers),
significant increases in lung tumors wereobserved in the exposed group, and there
were many adenocarcinomas as thehistological type. Furthermore, also in astudy in which female rats were exposed bynose inhalation to 6.1 and 30.6 mg/㎥ of thissubstance (MMAD: 1.8 micrometers), a
dose-dependent increase in lung tumors wasobserved, and squamous cell carcinoma was
the most common in the histological type,and bronchiolo/alveolar epithelial
carcinomas or adenomas were often
observed (IARC 100C (2012)).
From the above, based on information on
carcinogenicity in humans and experimental
animals, in 1997, IARC classified it in Group
1 with regard to carcinogenicity in humans
due to exposure to the dust of thissubstance, and even in a reevaluation in2012, the classification result was notchanged (IARC 68 (1997), IARC 100C
(2012)). As for results of carcinogenicity
classifications by other organizations, Japan
Society for Occupational Health classified it
in Group 1 (Recommendation of
Occupational Exposure Limits (2015)),ACGIH has classified it in A2 since 2004(ACGIH (7th, 2006)), and NTP classified
Crystalline Silica (Respirable Size) as K
(NTP RoC (13th, 2014)). Therefore, it wasclassified in Category 1A for this hazard
class.

Reproductive toxicity

No data available

No data available

2013/10/16
2024/3/15

9 / 11 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES13
Ｓ４Ｆ（Ａ，Ｂ）

SAFETY DATA SHEET
rev. 8.0

Specific target organ toxicity(single Classification not possible due to lack of
exposure)
data. Besides, the data on effects on thehuman respiratory organs used in theprevious classification was short-term
exposure data and not data on single-dose
acute effects.

Date of Issue
Revised Date

2013/10/16
2024/3/15

It was set as category 3 (respiratory
irritation) from the statement of upper
respiratory irritation (ICSC (2000)).

Specific target organ
toxicity(repeated exposure)In humans, in many epidemiological studies, It was classified into Category 1 according
effects on the respiratory organs (silicosis, the statement that by occupational exposurelung cancer, pulmonary tuberculosis) due to of aluminas, pulmonary fibrosis was occurredoccupational exposure to this substance(EHC (1997)).
were found. In addition, autoimmune
diseases (scleroderma, rheumatoid arthritis,
polyarthritis, mixed connective tissue
disease, systemic lupus erythematosus,
Sjogren's syndrome, polymyositis, fibrositis),chronic renal disease, and subclinical renalchanges were also observed (SIDS (2013),
CICAD 24 (2000), DFGOT vol. 14 (2000)).
These kidney diseases are thought to berelated to autoimmunity (SIDS (2013)).
Likewise in experimental animals, fibrosis in
the lung was found in repeated inhalation
exposure tests with rats (SIDS (2013)).
Therefore, it was classified in Category 1(respiratory organs, immune system, kidney).

Aspiration hazard

No data available

Other information

No data available

SECTION 12

No data available

Ecological information
SiO2 (Quartz)

Al2O3

Hazardous to the aquatic
environment Shortterm(acute)

From the test data on amorphous silica of
24-hour LL50 > 10,000 mg/L for crustacea(Daphnia magna) and 96-hour LL0 = 10,000
mg/L for fish (Danio rerio) (both SIDS,
2013), it was classified as "Not classified."

No data available

Hazardous to the aquatic
environment Longterm(chronic)

No data available

No data available

Persistence and degradablility

No data available

No data available

Bioaccumulative potential

No data available

No data available

Mobility in soil

No data available

No data available

Hazard to the ozone layer

No data available

No data available

Other adverse effects

No data available

No data available

Toxicity

10 / 11 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES13
Ｓ４Ｆ（Ａ，Ｂ）

SAFETY DATA SHEET
rev. 8.0

SECTION 13

Date of Issue
Revised Date

2013/10/16
2024/3/15

Disposal considerations

Waste treatment methods

Process is contracted to industrial waste disposers who received approval of aprefectural governor.

Contaminated container andcontaminated packaging

The container is recycled after being cleaned, or is appropriately processed
according to the standards of related laws and regulations.
When disposing of empty containers, the contents should be completely removed.

SECTION 14

Transport information
SiO2 (Quartz)

Al2O3

UN number

Not applicableNot applicable

UN proper shipping nameNot applicableNot applicable

UN classification

Not applicableNot applicable

Transport hazard class

Not applicableNot applicable

Packing group

Not applicableNot applicable

Hazardous to the aquatic
environment

No data available

No data available

Maritime transport in bulk
according to IMO instruments

No data available

No data available

Japanese lows and regulations

Land regulation information Not applicable
Maritime regulatory information nonhazardous materials
Aviation regulatory information nonhazardous materials

Land regulation information Not applicable
Maritime regulatory information nonhazardous materials
Aviation regulatory information nonhazardous materials

Special precautions for users

Requires retention of yellow card when
When transporting, protect from directtransporting.
sunlight and take on cargo without breakage
When transporting, protect from directof container, corrosion and leakage.
sunlight and take on cargo without breakageof container, corrosion and leakage.
Do not stack heavy good thereupon.

Special Provisions-

International regulation

SECTION 15-

Regulatoly information（Japan）
SiO2 (Quartz)

Al2O3

Occupational Safety and Health
Law

There is it in the case of an application oran application

Not applicable

PRTR Law

Not applicableNot applicable

Poisonous and Deleterious
Substances control Law

Not applicableNot applicable

Labor Standards Act

There is it in the case of an application oran application

Not applicableChemical substances control Law

Not applicableNot applicable11 / 11 Page
CANON OPTRON INC.
SDS Number：
Product Name：

ES13
Ｓ４Ｆ（Ａ，Ｂ）

SAFETY DATA SHEET
rev. 8.0

Date of Issue
Revised Date

2013/10/16
2024/3/15

Fire fighting Law

Not applicableNot applicable

Air Pollution Control Act

Not applicableNot applicable

Water Pollution Prevention Act

Not applicable

There is it in the case of an application oran application

Water Supply Act

Not applicable

There is it in the case of an application oran application

Sewerage Act

Not applicableNot applicable

Marine Pollution Prevention Law

There is it in the case of an application oran application

Not applicable

Waste Management and Public
Cleansing Act

Not applicableNot applicable

Note

Ensure this material in compliance with federal requirements and ensure
conformity to local regulations.

SECTION 16

Other information

The Safety Data Sheet (SDS) has been prepared based on currently available materials, information and data, and may berevised based on new information. Further, the important points in the SDS are made for the purpose of normal handling.
When handling the user product in a specialized manner, take the appropriate safety measures for the application or method.
Further, Canon Optron Inc. has paid sufficient attention to the described contents of the SDS, but does not guarantee theaccuracy of its contents.
The SDS prepared by our company includes all findings from our investigation for reference. Not applicable to all items listed.

Literature Reference[WEB site]
National Institute of Technology and Evaluation Homepage
Japan Advanced Information Center of Safety and Health Homepage
Ministry of Health, Labour and Welfare Homepage[Regulatory review Tools]
ezCRIC+ (Japan Chemical Database Ltd)