For High Purity Chemicals

Specifications

Semicon Cupla
SP Type

For semiconductor manufacturing production installation
Working pressure

Valve structure

Applicable fluids

Body material

Electropolished stainless steel (SUS304)

Size (Thread)

1/8", 1/4", 3/8", 1/2", 3/4", 1"
1/8-27NPT, 1/4-18NPT, 19/32-18UNS

Pressure unitMPa

kgf/cm2

bar

Working pressure

0.22229

Seal material

Mark

Workingtemperature range

Remarks

Fluoro rubber

FKM (X-100)

Ethylene-propylenerubber

EPDM (EPTS)

Seal material
Working temperature range

Perfluoroelastomer

PKalrezKL

0.2
Two-way shut-off

High purity
chemicals

WaterGas

0˚C to +50˚C Standard material
0˚C to +50˚C Standard material
0˚C to +50˚C Standard material
0˚C to +50˚C Standard materialMax. Tightening Torque

AirGeneral purpose type with stainlesssteel body and rubber seal.
Electro-polished body for enhanced
corrosion resistance.
• Body and valve springs are stainless steel (SUS304). Body is electro-polishedfor enhanced corrosion resistance.
• Seal materials can be selected to suit your fluid and application, to flexibly
comply with your semiconductor production process requirements.
• All components are cleaned, assembled, inspected, and then packed in a clean room.
• Grease free. No grease is applied to the seal material.
• Each plug comes with a dust cap.
• Stainless steel SUS316 body and valve springs are available as made-to-orderproducts.

Nm {kgf • cm}

Size

1/8-27NPT 1/4-18NPT
Rc 1/8Rc 1/419/3218UNS

Rc 3/8Rc 1/2

Rc 3/4Torque9 {92}

20 {204}

22 {224}60 {612}90 {918} 120 {1224}

14 {143}

Rc 1

Interchangeability
The model name starting with the same digit are interchangeable regardless of end configurations.

(mm2)

Min. Cross-Sectional Area
Model1SP2SP

3SP

4SP

6SP8SP

Min. cross-sectional area

1317486483192

Flow Rate – Pressure Loss Characteristics• Fluid : Water[Test conditions]• Temperature : 20˚C

5˚C

1.0 {10}

Pressure loss in MPa {kgf/cm2}

0.2 MPa{2 kgf/cm2}

PSI

0.1 {1}0.01 {0.1}

1S-304 x 1P-304
2S-304 x 2P-304
3S-304 x 3P-304
4S-304 x 4P-304
6S-304 x 6P-304
8S-304 x 8P-304
1101001000

Flow rate in L/min

Stainless steel containersModels and Dimensions

Plug

WAF : WAF stands for width across flats.

Female thread

SocketFemale thread
TDTC

H

Model

1P-304
1P-304-NPT
1P-304-UNS
2P-3042P-304-NPT
2P-304-UNS
3P-3044P-304
6P-304
8P-304

LContainer
capacity

For 10L to 20L
For 10L to 20L
For 10L to 20L
For 10L to 20L
For 10L to 20L
For 10L to 20L
For 100L to 200L
For 100L to 200L
For 100L to 200L
For 100L to 200L

L
Mass(g)Dimensions (mm)L

H(WAF)

1929

19

Hex.143433

19

Hex.21

35

36

22

Hex.17

4160
115
216
352364044526222252836
40

Hex.21
Hex.21
Hex.29Hex.35
Hex.41* Above are the dimensions of SUS304.
* The appearance of SUS304 and 316 bodies is different.

123CT
Rc 1/8
1/8-27NPT
19/32-18UNS
Rc 1/4
1/4-18NPT
19/32-18UNS
Rc 3/8Rc 1/2
Rc 3/4
Rc 1

Model

1S-304
1S-304-NPT
2S-3042S-304-NPT
3S-3044S-304
6S-3048S-304

Container
capacity

Mass(g)For 10L to 20L
For 10L to 20L
For 10L to 20L
For 10L to 20L
For 100L to 200L
For 100L to 200L
For 100L to 200L
For 100L to 200LH

Dimensions (mm)LøD

H(WAF)

82
84

48

24

14

138

58

28

19204
424
708
1081

65
72
88
102

35
4555
65

21293541

T
Rc 1/8
1/8-27NPT
Rc 1/4
1/4-18NPT
Rc 3/8Rc 1/2
Rc 3/4
Rc 1

Before use, please be sure to read “Safety Guide” described at the end of this book and “Instruction Sheet” that comes with the products.