EVG® LED
Exposure Optics
Introduction

Process performance

EVG has been evaluating LED technology since 2005. At that time, UV-LED technology
still faced some limitations for manufacturing purposes. In 2016, EVG re-launched its UVLED lamp house setup as UV-LED technology advanced significantly and overpassed
standard mercury light source in many aspects.

■UV-LED technology gives its users much more flexibility for their applications in terms ofUV exposure spectrum setup, as spectral lines are individually tunable and special opticalfilters are no longer required. Furthermore, low-energy consumption and long lifetime
are among the UV-LED light source’s advantages, as no warm-up or cool-down phaseis required. In addition, LEDs need to be powered only during the exposure process, andthe technology eliminates the need for additional facility (exhaust, cooling gases) andlamp changes, which are regularly needed for mercury arc lamps. This ideal combination
not only minimizes running and maintenance costs but also adds value with improved
operator safety and environmental friendliness. Mercury and its compounds are highly
toxic to humans and the environment; therefore, special obligations have to be followed
such as trained personnel, safety protective equipment for installation, replacements
and handling, as well as storage and hazardous toxic waste disposal. The latest UV-LED
technology secures safe operation, meaning no risk of toxic exposure during the regularmercury arc lamp installation, replacements or handling.
The European Union is moving toward a mercury-free economy
and thus issued a regulation [2017/852], which forbids
production, import and export of high-pressure mercury vapor
lamps for lighting and special purposes as a first step. The United
Nations (UN) organization addresses this environmental impact
globally with the ‘Minamata Convention on Mercury’, where over
100 parties have already committed to follow this program.

Contact
EV Group Europe & Asia/Pacific GmbHDI Erich Thallner Strasse 14782 St. Florian am Inn
Austria+43 7712 5311 0
Contact@EVGroup.com■■■

Fast and easy process recipetransfer
Broadband exposure spectrum(i-, g-, h-line)
Equivalent system throughput
performance
Available on mask aligner
platforms from R&D to HVM
production lineFeatures■Minimized operation costs- Without regular lamp
replacements- Clean and sealedlamp house setup- Minimum facility
requirements■

Minimized maintenance costs- Low power consumption- Long life-time- Instant on / off■

Spectrum lines are individually
tunable- No additional costs for filters- Consumables-free- No more contamination ofthe optics- Recipe controllable
wavelength intensity settings■

Green process- Mercury-free, Ozone-free- No hazardous operation andtoxic waste disposal

EVG®610 equipped withLED lamp housewww.EVGroup.com

Printed on paper from sustainable sources. Data, design and specifications may not simultaneously apply; or depend on individual equipment configuration, process conditions and materials and may vary accordingly. EVG reserves theright to change data, design and specifications without prior notice. All trademarks, logos, website addresses or equipment names are registered trademarks and/or the property of EV Group or their respective owners.
© EV Group (EVG). All rights reserved. V21/01

Mask Aligner OptionMask Aligner Option

EVG® LED Exposure Optics
Process Results

10 µm

10 µm

Vacuum contact exposure, chemically amplified positivethin film resist
Source: EVG

100 µm

50 µm thick SU-8 exposed pillars, sidewall angle 90° +/- 0.5°utilizing optimized exposure & process methods
Source: EVG

MEMS structures patterned in 20 µm thick resist
Source: EVG

100 µm

100 µmSiemens star showing high-resolution capabilities for
thick resist patterning
Source: EVG

250 µmHigh depth of focus exposure of KOH etched cavities
with a depth of 150 µm
Source: EVG

Imprinted microlenses using SmartNIL® technology withUV-LED light source
Source: EVG

Cum. SavingsOperating Costs Comparison-47%

Average Operating Costs/ Year

Estimated Operating
Cost Reduction / Yeartime
after 1 year
stHg cum. costs
LED cum. costs
after 3rd year

Cum. savings
after 5th year

after 7th year

Mercury lamp

LED lamp

Model was calculated
based on SEMI E35 CoO
comparing
500W Hg lamphouseand broadband
LED lamphouse

after 10th year

Get in touch:Contact@EVGroup.com

www.EVGroup.com