DRY VACUUM PUMPDRY VACUUM PUMPKTS Series
Air Cooled Compact Type

AIR-COOLED COMPACT DRY VACUUM PUMP
New dry vacuum pump model" KTS"is of a multi-stage Roots type configuration and can be operated incompletely DRY condition. Over 25 years,we have made improvements to our DRY PUMP technology that
resulted in CLEAN VACUUM and elimination of cooling water. The dry vacuum pump is developed with ournew concept having many good features such as:Long maintenance interval

Clean vacuum

FEATURE

Prolonged maintenance interval as the pump has no sliding partsor metal to metal contact.

No sealing fluids and no dust generation in pump.

High water vapor handling

Air-Cooled
No cooling water required.

S t r o ng c o n f ig ur a tio n to handle c ar r y ove r liquid and r ust p r o o f
coating. Flush air purge system available.

Compact dimensions & Lightweight

Leak tight construction

Aluminum housing and ductile cast iron rotor.

Canned motor provided(No shaft seal).

Low vibration &Low noise

Wide operating range

Noise and vibration kept low by dynamically balanced rotor.

Pump operates from atmosphere to a base pressure.

●Laboratory use

APPLICATION●Sputtering equipment, lon plating equipment●Load-lock, Device handling system, Vacuum chuck●Heat treatment furnace Vacuum furnace●Leak detectors●Gas recovery system●Vacuum packaging machine●Vacuum drying, De-aerator(water based)●Vacuum forming●Other clean vacuum processes

KTS300
KTS060

KTS015/KTS030

KTS series dry vacuum pump is suitable for use on clean process.
Please consult our factory for advice if your gas contents are explosive,flammable,toxic or corrosive.

SpecificationsModel
Pumping speed
Ultimate pressure

※1

Unit

KTS015

KTS030

KTS060

KTS300

KTS015-H

KTS030-H

L/min

280

500

920

5000

280

500

Pa≦3≦3≦3

≦0.5

≦0.08

≦0.08

NW40/NW40

NW50/NW40

0.90

1.30

Nozzle connection
Motor Power※2

NW25/NW25kW

0.44

1Phase3PhasePower source

0.50

0.30

200〜240V ※4200〜240V ※4100〜115V/200〜240V ※3200〜240V ※3

Stanadrd Accessory

NW25/NW25

100〜115V/200〜240V ※3200〜240V ※3

Pump case, Silencer, Hour meter, Remote operation function, Flush air function

Water vapor handlingg / hr<300Sound level (at1m)

dB(A)

≦63

≦65

≦72

≦56kg

3548100

38Weight<500

Conforming Standard

cTUVus, CE(Option)

KTS015/KTS030/KTS060/KTS300

KTS015-H/KTS030-H

10000

1000

Pumping speed (L/min)Pumping speed (L/min)cTUVus, CE(Option)※1: Value at no flush air ※2 : At ultimate pressure ※3: All source usable ※4: Please select 1 or 3 phase

Pumping speed

1000

100

101
Pa0.1
mbar 0.001

<300

10.01

100.1

100
11000
10

Suction pressure

10000
100100000
1000

100

10Pa0.1
mbar 0.001

10.01

100.1

100
11000
10

Suction pressure

10000100100000
1000Externals dimensional drawing
KTS015・KTS030

KTS015-H・KTS030-H
KTS015/030 Hタイプ

KTS015/030 ノーマル

HANGING BRACKET
MOUNTING PORT
NW25:EXHAUST PORTOPERATION LAMPHANGING BRACKET
MOUNTING PORT

NW25:EXHAUST PORT

NW25:EXHAUST PORTFLASH AIR PORTHANGING BRACKET
MOUNTING PORT

MAIN SWITCHFLASH AIR PORTHANGING BRACKET
MOUNTING PORTALARM RESET SEITCHHOUR METER

ALARM RESET SEITCHHOUR METER

MAIN SWITCHOPERATION LAMP

NW25:EXHAUST PORTFAILURE LAMP
FAILURE LAMP

POWER SUPPLY CONNECTORREMOTE CONNECTORREMOTE CONNECTORKTS060

POWER SUPPLY CONNECTOR

KTS300

KTS060

KTS300
HANGING BRACKET
MOUNTING PORT
NW40:EXHAUST PORT

NW50:EXHAUST PORT

NW40:EXHAUST PORTFLASH AIR PORT

NW40:EXHAUST PORT
HOUR METEROPERATION LAMP

FAILURE LAMP

FAILURE LAMPHANGING BRACKET
MOUNTING PORTOPERATION LAMP

HOUR METER

MAIN SWITCH

MAIN SWITCH

VENTILATIONINLETREMOTE CONNECTORREMOTE CONNECTOR

POWER SUPPLY CONNECTORUnozawa Products

POWER SUPPLY CONNECTOR

Inquiries

1. Rotary blower(Roots type)

When inquiring about Unozawa Dry vacuum pump,

2. Rotary vacuum pump(Roots type)please furnish us with the following information:

3. Dry vacuum pump

1. Application: Load-lock, Sputtering, Vacuum drier, etc.……

4. Mechanical booster

2. Specification: Pumping speed, Suction pressure

5. Water ring vacuum pump

3. Handling gas: Gas name, Suction gas temperature
4. Power source: Voltage, Hertz, Phase
5. Accessories:Required or not,please specify

Head Office & Tamagawa Factory : 2-36-40, Shimomaruko,Ohta-ku Tokyo 146-0092 Japan
Tel. ＋81-3-3759-4191 Fax. ＋81-3-3759-4251
Sales office : Tel. ＋81-3-3759-8101 Fax. ＋81-3-3759-8105
Osaka sales : Sakurabashi yachiyo Bldg., 2-5-6 Umeda,Kita-ku, Osaka 530-0001 Japan
Tel, ＋81-6-6344-0747 Fax. ＋81-6-6344-2405

http://www.unozawa.co.jp
While every care has been taken in the preparation of data and dimensional drawings,
we reserve the right to change specifications without notice.

FLASH AIR PORT