Performance
Under Pressure:
Krytox™ High-Performance Lubricants Play a
Critical Role in Semiconductor Fabrication

Krytox™

Semiconductor Brochure

The semiconductor industry is undergoing a dynamictransformation, with projections of hitting the $1 trillion
mark by as early as 2030.1 The increasing demand formore powerful chips and record levels of investment,
brought on by the adoption of AI and advanced connectivity,
brings with it new challenges in chip manufacturing. How
can device makers maximize chip yields while improving
performance and preventing contamination? The stringent
manufacturing requirements demand the ultimate reliability
in processing equipment, which in turn, relies heavily on
high-performance materials such as Chemours™ Krytox™
high-performance oils and greases.
Chemours Unique Capabilities:

near-universal chemical compatibility of Krytox™ high-Specialty portfolio: 180+ PFPE oil and grease

performance lubricants ensures the reliability of criticalformulations ranging from general purpose lubricants towafer handling components.

small batch specialty fluids
Rapid innovation: Subject matter expertise to support
rapidly evolving application requirements
World-class technical support: Application specifictesting, failure analysis, and tribology lab expertise
Global presence: Established global presence with

Krytox™ High-Performing Lubricants Offer theIdeal Solution
Krytox™ high-performance oils and greases are
specifically designed to achieve exceptional performanceacross a wide range of applications; capable ofwithstanding the harsh environments found throughout

extensive network of global technical sites, sales, andthe semiconductor manufacturing process:tech service

Chemically Inert / Non-Reactive: Among the most

Supply security: Backward integrated supply chain

chemically resistant lubricants on the market and are

Proper Lubrication Selection is a Make-or-lacquers, or sludges

Break Decision
In an industry in which downtime is costly and productivity
is pushed to the limits, equipment reliability is crucial for
enabling high chip yields. From essential vacuum pumps
to robotic systems that are used to accurately position
wafers during critical process steps—proper lubrication
is a key component of equipment reliability.
With the multitude of reactive chemicals used acrossthe semiconductor manufacturing process, the

100% oxygen safe, non-flammable, and cannot form tars,
Material Compatibility: Compatible with all commonelastomers and polymers used in semiconductor
manufacturing environments containing strong acids,oxidizers, caustics, reactive gas radicals, pyrophoricgases, and more
Temperature Stability: Performance and protection in
extreme environments and operating temperatures from–70°C to +400°C, with vapor pressures as low as
1 x 10-13 mmHg at 20°C (wide temperature envelope)
Low Outgassing: Best-in-class performance inHigh-performance Krytox™
lubricants are trusted throughout
the semiconductor manufacturing
process with a proven trackrecord of extreme temperature
performance and low outgassing.

semiconductor applications and trusted by military andaerospace industries for applications where outgassing
performance is mission-critical
Broad Application Range: Widely used by thesemiconductor industry across various process tools usedin CVD, diffusion, etch, ion implantation, and lithography
1

Source: IDC report issued in December 2023 to Semiconductor Industrial
Association (SIA)

Krytox™

Semiconductor Brochure

Unparalleled Benefits Through Every Step of theDelivering Exceptional Performance in Key Applications

Semiconductor Manufacturing Process

Major vacuum pump manufacturers and OEM suppliers
rely on the performance of Krytox™ lubricants across awide range of applications. Krytox™ high-performance oils
and greases deliver a unique combination of unparalleledproperties in the most stringent environments, enabling
consistent performance and increased uptime ofprocess tools.

Because these versatile lubricants can withstandextreme temperatures and pressures, reduce
contaminants and outgassing, and are safe for handling,
Krytox™ high-performance oils and greases can beused effectively throughout the entire semiconductor
manufacturing process.
Krytox™ multi-purpose, high-temperature, anti-corrosion
lubricants (greases, oils, and vacuum pump fluids) are used
in a variety of production line processes, including:• Photolithography• Deposition• Etching• PCB Assembly

Krytox™ lubricants are used throughout the semiconductor
manufacturing process and are compatible in a wide rangeof chemicals such as acids, oxidizers, caustics, reactive gas
radicals, and pyrophoric gases. Applications range fromvacuum pumps to other components like bearings, valves,seals, O-rings, chains, compressors, gear boxes, linear
guides and ball screws, and mechanical pumps. A selectionof Krytox™ products used in the semiconductor industry
include but are not limited to:

Krytox™ Greases1
Product

Estimated Useful
Range, °C (°F)

Base Oil Viscosity,cSt at 40°C (104°F)

Vapor Pressure, Torr

ASTM
E5952

Krytox™ 240 AA-51 to 177 (-60 to 350)

33

1 x 10–4 mmHg at 38°C (100°F)—

Krytox™ 240 AB-40 to 232 (-40 to 450)76

5 x 10–6 mmHg at 38°C (100°F)—

Krytox™ EG 2000

-34 to 288 (–30 to 550)240

8 x 10–8 mmHg at 38°C (100°F)

Pass

Krytox™ EG 3000

-29 to 316 (–20 to 550+)440

6 x 10–9 mmHg at 38°C (100°F)

Pass

Krytox™ LVP-15 to 300 (5 to 572)

749

1 x 10–13 mmHg at 20°C (68°F)

Pass

Krytox™ XHT-BD

300 to 400 (572 to 752)

599

≤1 x 10–9 mmHg at 20°C (68°F)

Pass

Krytox™ XHT-BDX

300 to 400 (572 to 752)

738

≤3 x 10–14 mmHg at 20°C (68°F)

Pass

Krytox™ XHT-BDZ

300 to 400 (572 to 752)

1023

≤4 x 10–15 mmHg at 20°C (68°F)

Pass

Krytox™ Vacuum and Clean Room Oils1
Product

Estimated Useful
Range, °C (°F)

Base Oil Viscosity, cSt

Vapor Pressure, TorrKrytox™ VPF 1525

TBD

250 at 20°C (68°F)

1 x 10–7 mmHg at 20°C (68°F)

Krytox™ VPF 1531

TBD

310 at 20°C (68°F)

1 x 10–7 mmHg at 20°C (68°F)

Krytox™ XHT-500-20 to 300 (–4 to 572)

500 at 40°C (104°F)≤1 x 10–9 mmHg at 20°C (68°F)

Krytox™ XHT-750-15 to 350 (5 to 662)

738 at 40°C (104°F)≤3 x 10–14 mmHg at 20°C (68°F)

Krytox™ XHT-1000–5 to 360 (23 to 680)

1023 at 40°C (104°F)≤4 x 10–15 mmHg at 20°C (68°F)

1Note: These values are typical properties and not specifications.

2E595 criteria to pass is <1% for Total Mass Loss and <0.1% for Collected Volatile Condensable Material.

Please contact us at https://www.krytox.com/en/contact to connect with our technical service team or visit
Krytox.com to learn more about our offerings.

Krytox™

Semiconductor Brochure

Chemours Remains Steadfastly Committed toproduction and use of these high-performance materials
that are essential to societal advancement. We have set
aggressive emissions reduction targets and, as of theend of 2023, have already achieved a 52% reductionin Scope 1 & 2 greenhouse gas emissions on a pathto net-zero by 2050. Beyond emission reduction, westrive to enrich the communities we serve and call home.
Our Krytox™ manufacturing site is Gold Certified by theWildlife Habitat Council and contains a pollinator garden,
nature trails used as field classrooms by local elementary
schools, and is home to over 175 bird species. The site
actively engages with the local community through theCommunity Advisory Panel and ChemFEST, our middle
school partnership program.

Sustainability and Responsible Manufacturing
At Chemours, we realize our products play a criticalrole in our daily lives, the global economy, and a better
future for our world. That’s why the protection of theplanet and everyone on it is one of our core values. By
providing longer-lasting lubrication, our products lower
the frequency of lubrication, reducing the use of materials
and waste—important steps in helping to reduce productimpact on the planet. In addition to improving productimpact, we’re working to reduce production impact on
the planet through responsible manufacturing. We takea holistic, environmental approach to the invention,

Krytox™ Performance Lubricants have properties that reduce impact on the environment:• Krytox™ products are fully synthetic—not petroleum-recycling, and disposal of these products must be inbased—and unlike other lubricants, at temperatures

accordance with applicable federal, state/provincial,under 350°C (662°F), Krytox™ oil does not oxidize.

and local regulations.

• Krytox™ oils and greases are not considered• By providing longer-lasting performance, Krytox™

hazardous as manufactured under the U.S. EPA

lubricants lower the frequency of lubrication, reducing

Resource and Recovery Conservation Act guidelines.

the use of materials and waste—important steps in

However, treatment, storage, transportation,helping to reduce product impact on the planet.

We Believe in the Power of Chemistry
At Chemours, we create collaborative relationships. Our priority is to help you meet and exceed your goals by delivering
exceptional products, dedicated service, and innovative solutions that make a positive impact on the industry, thecommunity, and the world around us.
To learn more about Krytox™ high-performance lubricants for the semiconductor industry, please visit
https://www.krytox.com/en/industries/electronics-semiconductors.
To find out more about the Chemours commitment to sustainability and how our advanced performance materials
can help you meet and exceed your goals, contact us today at https://www.krytox.com/en/contact.

The information set forth herein is furnished free of charge and based on technical data that Chemours believes to be reliable.
Chemours makes no warranties, express or implied, and assumes no liability in connection with any use of this information. Nothingherein is to be taken as a license to operate under or a recommendation to infringe on any patents or trademarks.
©2024 The Chemours Company FC, LLC. Nafion™, Teflon™, and any associated logos are trademarks or copyrights of The Chemours
Company FC, LLC. Chemours™ and the Chemours Logo are trademarks of The Chemours Company.
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