MNC 2023

MNC 2023 (November 14-17, Keio Plaza Hotel Sapporo, Hokkaido, Japan) Program
Keynote (On-demand), You can watch the video file from My Page of the Registration Site
Keynote-SA

Keynote-11

New Trends of Curvilinear Data Flowin Leading-Edge Semiconductor
Manufacturing
Kokoro Kato, Synopsys, Inc., JapanEUVL R&D at NewSUBARU
Synchrotron Light Facility
Takeo Watanabe, Univ. of Hyogo,
Japan

Imaging carrier dynamics insemiconductors using
femtosecond photoemissoin
electron microscopy

Keynote-21

Keynote-22

Keynote-24

2D layered semiconductors:
Challenge & Perspective
Kosuke Nagashio, Univ. of Tokyo,
Japan

Keynote-4

Microfluidic devices for biomedical
applications
Eiichi Tamiya, Osaka Univ., Japan

Keynote-12

Keiki Fukumoto, KEK, Japan

Design and Integration of NextGeneration Edge AI Chips:
Challenges and Opportunities

Designing Topological Magnetic
Materials for Innovative Quantum
Electronics

K.-T. Tim Cheng, Hong Kong Univ. ofSci. and Technol., Hong Kong

Satoru Nakatsuji, Univ. of Tokyo,
Japan

Keynote-5

Keynote-6

Daichi Chiba, Osaka Univ., Japan

Emerging UWBG material: GeO2
Kentaro Kaneko, Ritsumeikan Univ.,Japan

Mechanical motion detection by
spintronics

Keynote-13

EUV RESIST MATERIALSDEVELOPMENT; PAST,PRESENT AND FUTURE
Toru Fujimori, FUJIFILM, Japan

Keynote-3
Smart process and martial design for
nanoimprint lithography assisted bydeep learning
Yoshihiko Hirai, Osaka Metropolitan
Univ., Japan

Tuesday, November 14, 2023
Room B (Rose Room) (2F)
13:00-17:20 Technical Seminar in Japanese “ALD”
Room P1 (Plaza Hall) (B1F)
17:40-19:40 Get Together Party

Wednesday, November 15, 2023
Room A (Eminence Hall) (2F)
15P-1: Opening & Plenary Session (9:30-12:10)
Chairs: Koji Asakawa (Kioxia), Shinya Kumagai (Meijo Univ.), Kouichi Takase (Nihon Univ.) and Tomoki Nagai (JSR)

15P-1-0 9:30-9:50
Opening Remarks: Seiya Kasai (Hokkaido Univ.), Award Presentation: Seiya Kasai (Hokkaido Univ.) and Koji Asakawa (Kioxia)
Local Announcement : Seiji Nagahara (Tokyo Electron)

15P-1-1 9:50-10:30
Technologies that will propel compute systems scaling in the next decade (Plenary)
Sri Samavedam, imec, Belgium

Coffee Break
15P-1-2 10:50-11:30
Quantum Computing Roadmap – Path to Quantum Advantage (Plenary)
Heike Riel, IBM Research Europe, Switzerland

15P-1-3 11:30-12:10
Challenges and Opportunities of Semiconductor Packaging in the Chiplet Era (Plenary)Yasumitsu Orii, Rapidus Corporation, Japan
15-1-4: Luncheon Seminar Chair: Daiyu Kondo (Fujitsu)

15P-1-4 12:20-13:10 Luncheon Seminar by Technical Exhibitor
1. CRESTEC CORPORATION, 2. Heidelberg Instruments KK, 3. ELIONIX INC., 4. SUGA Co., Ltd., 5. ORGANO CORPORATION

Wednesday, November 15, 2023
Room A (Eminence Hall) (2F)
+On-line
15A-2: Symp. A. Challenge to the

15B-2: Symp. C. Process and

15C-2: BioMEMS, Lab on a Chip,

15D-2: Nanocarbons & 2D

physical limit for lithography anddevices: Are we ready to boost thescaling roadmap? I (13:30-15:00)
Chairs:Koji Asakawa (Kioxia)
Tomoki Nagai (JSR)

Device Technologies for Quantum
Computing I (13:30-15:20)
Chairs:Wataru Mizubayashi (AIST)
Tsuyoshi Hatano (Nihon Univ.)and Nanobiotechnology I (13:3015:20)
Chairs:Kazuaki Furukawa (Meisei Univ.)
Akira Matsumoto ((Tokyo Medical and
Dental)Materials I (13:30-15:00)
Chairs:Yasumitsu Miyata (Tokyo Metropolitan
Univ.)Taishi Takenobu (Nagoya Univ.)

15A-2-1 13:30
EUVL R&D at NewSUBARU
Synchrotron Light Facility (Invited)

15B-2-0 13:30
Opening Address

15C-2-1 13:30
Integration of an optical
microneedle and gradient-index(GRIN) lens towards lowinvasive sensing inside the body

15D-2-1 13:30
Science and engineering of
excitons in low-dimensional
nanomaterials (Invited)

Takeo Watanabe, Tetsuo Harada andShinji Yamakawa, Univ. of Hyogo,
Japan

Room B (Rose Room) (2F)

Wataru Mizubayashi, AIST, Japan

15B-2-1 13:35
Current Status and Future of
Quantum Computers-Interration
between Hardtech and Users(Tutorial)
Nobuyuki Imoto, Univ. of Tokyo, Japan

15A-2-2 14:00
High NA EUV progress towards
introduction in high-volume
semiconductor manufacturing(Invited)

Jara G. Santaclara 1, Raymond Maas 1,
Rudy Peeters 1, Rob van Ballegoij 1,
Sjoerd Loka, Jan van Schoot 1, Paul
Graeupner 2, Peter Kuerz 2, Jorg
Mallmann 1, Greet Storms 1, Peter
Vanoppen 1, 1 ASML Netherlands, The
Netherlands and 2 Zeiss SMT, Germany

15B-2-2 14:20
Development of hardware
technologies for quantum
computing: Superconducting
and diamond-spin qubit
technologies (Invited)
Shintaro Sato, Fujitsu, Japan

Room C (Crown Hall) (2F)

Room D (Clover Room) (2F)

Yuhei Miyauchi, Kyoto Univ., Japan

Masahiro Fukuhara 1, Yukihiro Kanda
1,2, Hiroaki Takehara 1,2 and Takanori
Ichiki 1,2, 1 Univ. of Tokyo and 2
iCONM, Japan

15C-2-2 13:50
Direct delivery of functionalcargoes into cellular cytosol bynanotube stamping
Aya Fujiwara, Riku Shibata, Riko
Kishida, Yuiko Mizuguci, Kazuhiro
Oyama, Takeo Miyake and Takashi
Tanii, Waseda Univ., Japan-1-

15D-2-2 14:00
Evaluation of hexagonal boron
nitride single crystals from theviewpoint of the application in 2D
materials science
Momoko Onodera 1, Kenji Watanabe
2, Rai Moriya 1, Takashi Tanigushi 2
and Tomoki Machida 1, 1 Univ. ofTokyo and 2 NIMS, JapanMNC 2023

Room A (Eminence Hall) (2F)
+On-line
15A-2-3 14:30
High NA EUV insertion into
DRAM: Opportunities andchallenges (Invited)

15B-2-3 14:50
Scalable integration ofsuperconducting quantum
circuits (Invited)

Ryoung-han Kim, imec, Belgium

Shuhei Tamate, RIKEN, Japan

Room B (Rose Room) (2F)

Room C (Crown Hall) (2F)

Room D (Clover Room) (2F)

15C-2-3 14:10
Medical Applications of Cell
Origami and Formations ofCancer Tumors using Cancer-ona-Chip (Invited)

15D-2-3 14:20
Ferroelectric properties ofhexagonal boron nitride thin films
Mina Maruyama and Susumu Okada,
Univ. of Tsukuba, Japan

Kaori Kuribayashi-Shigetomi,
Hokkaido Univ., Japan

15C-2-4 14:40
Creating repairable nanopores oncell membrane by non-thermal
atmospheric pressure plasma
exposure for effective substanceintroduction
Tatsuya Kitazaki and Shinya Kumagai,
Meijo Univ., Japan

15C-2-5 15:00
Triangular spiral microfluidics forultra-fast separation of cancercells

15D-2-4 14:40
Surfactant-free fabrication of CNT
thin films on bilayer interface byutilizing dispersibility difference insolvents
Y. Shimada, S. Nishida, T. Endo, K.
Otsuka, S. Maruyama and S. Chiashi,
Univ. of Tokyo, Japan

15D-2: 15:00-15:10
Author's Interview

Xinjie Zhang, Zixiao Zheng and Yao
Liu, Hohai Univ., China

15A-3: Symp. A. Challenge to thephysical limit for lithography anddevices: Are we ready to boost thescaling roadmap? II (15:30-17:00)

Chairs:Sachiko Kobayashi (Kioxia)
Tetsuo Harada (Univ. of Hyogo)

15A-3-1 15:30
Ultra-High productivity Etch
Process for Beyond 10μm Depth
Memory Channel Hole of
3DNAND Flash Devices (Invited)

15C-2: 16:50-17:00
Author's Interview
Lobby (2F)
Coffee Break
15B-3: Symp. C. Process and
15C-3: BioMEMS, Lab on a Chip,
Device Technologies for Quantum
Computing II (15:40-17:15)

Chairs:Wataru Mizubayashi (AIST)
Tsuyoshi Hatano (Nihon Univ.)

15B-3-1 15:40
Quantum computing with spin
qubits in silicon (Invited)
Takashi Nakajima, RIKEN, Japan

15A-3-2 16:00
Mask innovations on the eve ofHigh NA EUV lithography (Invited)

15B-3-2 16:10
Linking Spin Qubits in Quantum
Dot Arrays (Invited)

Vicky Philipsen 1, Andreas Frommhold
1, Devesh Thakare 2, Guillaume
Libeert 1, Inhwan Lee 1, Joern-Holger
Franke 1, Joost Bekaert 1, Lieve Van
Look 1, Nick Pellens 1, Peter De
Bisschop 1, Rik Jonckheere 1, Tatiana
Kovalevich 1, Vincent Wiaux 1, Eric
Hendrickx 1, 1 imec and 2 KU Leuven,
Belgium

Takafumi Fujita and Akira Oiwa,
Osaka Univ., Japan

15A-3-3 16:30
Recent development ofphotoresist modeling in
preparation of high-NA EUV
Lithography (Invited)

15B-3-3 16:40
Towards photonic interconnects
between ion trap quantum
computers (Invited)

A. Vaglio Pret 1,2, Y. Liu 2, C. Higgins
2, T. Graves 2, S.A. Robertson 2 andJ.J. Biafore 2, 1 KLA-Tencor Italy, Italy
and 2 KLA, USA

Materials II (15:30-16:30)
Chairs:Shohei Chiashi (Univ. of Tokyo)
Masaki Tanemura (Nagoya Inst. ofTechnol.)

15C-3-1 15:30
Self-folding control of multilayer
graphene film for neuralstimulations

15D-3-1 15:30
Evaluation of thermoelectric
power and electrical resistance ofa cross contact interface between
carbon nanotubes by transmission
electron microscopy

Toichiro Goto 1, Tetsuhiko Teshima 2,
Koji Sakai 1, Yosuke Mizuno 1,
Masumi Yamaguchi 1, 1 NTT, Japanand 2 NTT Res. Incorporated, USA

Maju Tomura, Yoshihide Kihara andMasanobu Honda, Tokyo Electron
Miyagi, Japan

Hiroki Takahashi, OIST, Japan

15B-3-4 17:10
Closing Remark
Tsuyoshi Hatano, Nihon Univ., Japan

15D-3: Nanocarbons & 2D

and Nanobiotechnology II (15:3016:50)
Chairs:
Shigeyasu Uno (Ritsumeikan Univ.)
Shinya Kumagai (Meijo Univ.)

Soma Yamamori, Hiroto Oki and Kaori
Hirahara, Osaka Univ., Japan

15C-3-2 15:50
Sensitivity Improvement of Optical
Interferometric surface stress Gas
Sensor by Thinning Deformable
Membrane

15D-3-2 15:50
Manufacturing and applications ofultra-thin, free-standing, large
scale CNT, BNNT and metal
nanowires films

Ryusei Sogame, Yong-Joon Choi,
Toshihiko Noda, Kazuaki Sawada andKazuhiro Takahashi, Toyohashi Univ.
of Technol., Japan

Marcio D. Lima, Takahiro Ueda andTakeshi Kondo, LINTEC OFAMERICA, USA

15C-3-3 16:10
Method for Identifying Positions ofProteins Bound to a Single DNA
Molecule Stretched andImmobilized in a Microchannel

15D-3-3 16:10
Selective detection of NH3 gasusing single-walled carbon
nanotubes decorated withphenanthroline-based
nanocalipers

Kento Tanaka, Naoki Azuma, Ryotaro
Suzuki, Kenji Fukuzawa, Shintaro Itohand Hedong Zhang, Nagoya Univ.,
Japan

15C-3-4 16:30
Application of deep learning foranalyzing scattering patterns from
nanoparticles measured bynanoparticle tracking analysis
Yamamoto Keisuke, Hiroaki Fukuda,
Hiromi Kuramochi, Yasushi Shibuta
and Takanori Ichiki, Univ. of Tokyo,
Japan

15C-2, 3: 16:50-17:00
Author's Interview
Lobby (2F)
Coffee Break-2-

Kota Tanaka 1, Ken Hiraoka 1, Xinyi
Fu 2, Hiroshi Tabata 1, Osamu Maida
1, Naoki Komatsu 2 and Mitsuhiro
Katayama 1, 1 Osaka Univ. and 2
Kyoto Univ., Japan

15D-3: 16:30-16:40
Author's Interview

MNC 2023
Room A (Eminence Hall) (2F)
+On-line
15A-4: Advanced Lithography andRoom B (Rose Room) (2F)

Room C (Crown Hall) (2F)

15B-4: Atomic Layer Processing

15C-4: Nanofabrication I (17:20-

15D-4: Organic nanomaterials

Patterning (17:30-18:30)
Chairs:Sachiko Kobayashi (Kioxia)
Tetsuo Harada (Univ. of Hyogo)

I (17:40-18:50)
Chairs:Fumihiko Hirose (Yamagata Univ.)
Yasutaka Matsuo (Hokkaido Univ.)

19:00)
Chairs:Kazuhiko Endo (Tohoku Univ.)
Ryu Hasunuma (Tsukuba Univ.)(17:00-18:40)
Chair:
Akito Masuhara (Yamagata Univ.)

15A-4-1 17:30
Spatial Frequency Annalysis to
Breakdown Patterning Variability

15B-4-1 17:40
Application of metal oxide
semiconductors to threedimensional integrated circuitsby ALD technology (Invited)

15C-4-1 17:20
Origin of the magnetic moment
and the durability of themagnetism in ferromagnetic ZnOnanoparticles

15D-4-1 17:00
High-Performance Halide-mixed
Perovskite Quantum Dots throughutilizing Quantum Size EffectYukiharu Uraoka, Nara Institute of
Science and Technology, Japan

Josuke Tamura, Takuto Nakazawa,
Akihiro Fukawa, Chiehisa Takeoka andKouichi Takase, Nihon Univ., Japan

Naoaki Oshita 1, Hiyori Saito 1,
Satoshi Asakura 2, Motohumi
Kashiwagi 3, Akito Masuhara 1,4, 1
Yamagata Univ., 2 ISE Chem., 3
ZEON and 4 ROEL, Japan

15B-4-2 18:10
Surface roughening and edge
stability evaluation for Si(110)
ultrathin nanosheet transistor
channel15C-4-2 17:40
Demonstration of vertical lightemitting diodes using wurtzite
InP/AlInP core-multishell
nanowires

15D-4-2 17:20
Precise Thickness Control of
Perovskite Nanocrystals Based on
Molecular Structure of Carboxylic
Acid Ligands

Y. Morita, S. Nunomura, T. Irisawa
and H. Ota, AIST, Japan

Ziye Zheng, Shun Kimura, Junichi
Motohisa and Katsuhiro Tomioka,
Hokkaido Univ., Japan

Taisei Kimura 1, Ryohei Yamakado 1,
Satoshi Asakura 2 Motofumi
Kashiwagi 3 and Akito Masuhara 1, 1
Yamagata Univ., 2 Ise Chem. and 3
ZEON, Japan

15B-4-3 18:30
Surface-activated wafer bondingof ALD Al2O3 ultrathin films

15C-4-3 18:00
Implementation of a rock-paperscissors judgment system with a
Ag2S reservoir

15D-4-3 17:40
Increased Mechanical Stability by
Filling the Interconnected Pores ofPorous Microneedles

Atsuhiro Mizuno, Yuki Ohno, Masaru
Hayakawa, Kaiki Yoshimura andTsuyoshi Hasegawa, Waseda Univ.,Japan

Kevin Barthelmes 1, Kittipat
Sathitaphiwan 2, Nuttawut
Janwimaluang 2 and Akira Matsumoto
1,3,4, 1 Tokyo Medical and Dental
Univ., Japan, 2 Chulalongkorn Univ.,
Thailand, 3 Kanagawa Inst. ofIndustrial Sci. and Technol., 4 Univ. ofTokyo, Japan

15C-4-4 18:20
Ecofriendly photolithography using
water-coating and waterdevelopable processes for 3D cellsheet structures ofpolyglucuronate derivatives

15D-4-4 18:00
Construction of HeterogeneousSuperlattice Using a Perylene
Bisimide Derivative and a
Perovskite Nanocrystal

Mark John Maslow 1, Lieve van Look
2, Joost Bekaert 2, Daniel Riggs 3 andTatiana Kovalevich 2, 1 ASML
Netherlands, 2 imec, Belgium and 3
ASML San Diego, USA

15A-4-2 17:50
EUV durability of CNT pellicles fornext-generation scanner
Takahiro Ueda 1, Marcio D. Lima 1,
Tetsuo Harada 2, Takeo Watanabe 2,
and Takeshi Kondo 1, 1 LINTEC OFAMERICA, USA and 2 Univ. of Hyogo,Japan

15A-4-3 18:10
Pattern deformation mitigation for
EUV photoresist by wafer
backside cleaning techniques
Masahiko Harumoto 1, Andreia
Figueiredo dos Santos 2, Wesley
Zanders 2, Elke Caron 2 and Jelle
Vandereyken 3, 1 SCREEN
Semiconductor Solutions, Japan, 2
SCREEN SPE Germany, Germany
and 3 imec, Belgium

15A-4: 18:30-18:40
Author's Interview

Kenji Uno and Ryo Takigawa,
Kyushu Univ., Japan

15B-4: 18:50-19:00
Author's Interview

Sayaka Miura, Rio Yamagishi and
Satoshi Takei, Toyama Pref. Univ.,
Japan

15C-4-5 18:40
3D Vertical Gate-all-around Si
Nanowire Transistors
Chi Sun 1,2, Yang Guo 1,2 andChangzhi Gu 1,2, 1 Chinese Academyof Sci. and 2 Univ. of Chinese
Academy of Sci., China.

Room D (Clover Room) (2F)

Naoki Kubo, Mitsuaki Yamauchi and
Sadahiro Masuo, Kwansei Gakuin
Univ., Japan

15D-4-5 18:20 Withdrawn
Phosphorescence efficiency
depending on orientation ofnaphthalene-linked ammonium
molecules incorporated into lead
halide-based organicinorganic
hybrid quantum-wells
Masanao Era and Koji Maeda, Saga
Univ., Japan

15C-4: 19:00-19:10
Author's Interview

15D-4-6 18:20
Formation andphotoelectrochemical properties ofcharge-transfer complexes
comprising of charged π-electronicsystems
Erika Saito, Yuka Tanaka, Ryohei
Yamakado and Shuji Okada,
Yamagata Univ., Japan

15D-4: 18:40-18:50
Author's Interview-3-

MNC 2023

Thursday, November 16, 2023
Room A (Eminence Hall) (2F)
+On-line
16A-1: Symp. A. Challenge to thephysical limit for lithography anddevices: Are we ready to boost thescaling roadmap ? III (9:00-10:30)

Chairs:Sachiko Kobayashi (Kioxia)
Tetsuo Harada (Univ. of Hyogo)

16A-1-1 9:00
Impact of HighNA half-field to fullfield overlay performance byMonteCarlo simulations (Invited)
Romain Lallement, Daniel Schmidt,
Richard Johnson, Christopher Carr,
Martin Burkhardt, Jaime Morillo, Allen
Gabor, IBM Reserch, USA, (Online)

16A-1-2 9:30
Direct print EUV patterning of tightpitch metal layers for Intel 18A
process technology node (Invited)

Room B (Rose Room) (2F)

Room C (Crown Hall) (2F)

16B-1: Atomic Layer Processing

16C-1: Nanofabrication II (9:00-

16D-1: Nanocarbons & 2D

II (9:00-10:10)
Chairs:Jiyoung Kim (Univ. of Texas)
Norifusa Sato (NIMS)

10:50)
Chairs:
Katsuhiro Tomioka (Hokkaido Univ.)
Takeru Okada (Tohoku Univ.)

Materials III (9:00-10:30)
Chairs:Kazuhiro Yanagi (Tokyo Metropolitan
Univ.)
Shinichiro Mouri (Ritsumeikan Univ.)

16B-1-1 9:00
Atomic Scale Processing for
Quantum Computing (Invited)

16C-1-1 9:00
Design of Inorganic Nanowires
based on Coordination Structure
for Smart Artificial Olfactory
System (Invited)

16D-1-1 9:00
Growth and functionalization
dynamics of atomically thin 2D
materials revealed with in-situ
monitoring processing (Invited)

Kazuki Nagashima, Hokkaido Univ.,Japan

Toshiaki Kato, Tohoku Univ., Japan

16C-1-2 9:30
MFCC Feature Extracted Voice
Recognition Task with PhysicalReservoir Computing Device

16D-1-2 9:30
Perovskite Light-Emitting Diode
Display enabled by MoS2
Backplane Thin- Film Transistors

Ahmet Karacali, Oradee Srikinkaew,
Yuki Usami and Hirofumi Tanaka,
Kyushu Inst. of Technol., Japan

Seunghyeon Ji 1, Sa-Rang Bae 2, Soo
Young Kim 2 and Jong-Hyun Ahn 1, 1
Yonsei Univ. and 2 Korea Univ., Korea

16C-1-3 9:50
Prototyping of microelectrodedevices applied transfer print.

16D-1-3 9:50
Fabrication and characterizationof Janus MoSSe nanoscrolls

Kazuki Komiya 1,2, Yoshikazu
Teranishi 1, Hidehiko Yamaoka 1,
Shuichi Date 1 and Ming Yang 2, 1
Tokyo Metropolitan Industrial Technol.
Res. Inst. and 2 Tokyo Metropolitan
Univ., Japan

Masahiko Kaneda 1, Wenjin Zhang 1,
Zheng Liu 2, Yanlin Gao 3, Mina
Maruyama 3, Yusuke Nakanishi 1,
Hiroshi Nakajo 4,5, Soma Aoki 4, Kota
Honda 6, Tomoya Ogawa 1, Kazuki
Hashimoto 1, Takahiko Endo 1, Kohei
Aso 7, Tongmin Chen 7, Yoshifumi
Oshima 7, Yukiko Yamada-Takamura
7, Yasufumi Takahashi 6,8, Susumu
Okada 3, Toshiaki Kato 4 andYasumitsu Miyata 1, 1 Tokyo
Metropolitan Univ., 2 AIST, 3 Univ. of
Tsukuba, 4 Tohoku Univ., 5 KOKUSAI
ELECTRIC, 6 Nagoya Univ., 7 JAIST
and 8 Kanazawa Univ., Japan

16C-1-4 10:10
Growth Mechanisms of Self–
Assembling Si–QDs on
Thermally–Grown SiO2

16D-1-4 10:10
Energetics and electronic
structure of Janus WSSe withscrolled structures

Jongeun Baek, Yuki Imai, Ryoya Tsuji,
Katsunori Makihara and Seiichi
Miyazaki, Nagoya Univ., Japan

Yanlin Gao and Susumu Okada, Univ.
of Tsukuba, Japan

16C-1-5 10:30
First-Principles Study of O-Doped
GeTe/Sb2Te3 Superlattice

16D-1: 10:30-10:40
Author's Interview

Harm C.M Knoops 1,2, 1 Oxford
Instruments Plasma Technol., UK
and 2 Eindhoven Univ. of Technol.,
The Netherlands

16B-1-2 9:30
Deposition of Cubic Octamer of
Tetramethyl Orthosilicate

Raguraman Venkatesan, Intel, USA,
(Online)Kotaro Makino, Misako Morota,
Shinji Tanaka, Noriyuki Uchida andMasayasu Igarashi, AIST, Japan

16A-1-3 10:00
Fueling the Scaling Roadmap with
Vertical Integration: a Patterning
Perspective (Invited)

16B-1-3 9:50
Metallic nanofilms on Si(100)and SiO2 grown with aruthenium precursor

Luciana Meli, Jennifer Church, IndiraSeshadri, Eric Miller, Martin Burkhardt
and Nelson Felix, IBM
Semiconductors, USA (Online)

Leonid Bolotov 1, Yohei Kotsugi 2,
Tomohiro Tsugawa 2 and Noriyuki
Uchida 1, 1 AIST and TANAKA
Kikinzoku Kogyo, Japan

16B-1: 10:10-10:20
Author's Interview

Room D (Clover Room) (2F)

Mutsumi Miuchi, Ryoma Shirakawa,
Eiji Sawai, Shunsuke Yahagi and You
Yin, Gunma Univ., Japan

16A-2: Patterning materials (11:00-

16C-1: 10:50-11:00
Author's Interview
Lobby (2F)
Coffee Break
16B-2: Atomic Layer Processing
16C-2: Nanofabrication III (11:20-

16D-2: Nanocarbons & 2D

12:00)
Chairs:Julius Santillan (AIST)
Satoshi Enomoto (Toyo Gosei)

III (10:40-11:30)
Chairs:
Shigeo Yasuhara (Japan Advanced
Chemicals)
Fumikazu Mizutani (Kojundo
Chemical Lab.)

12:40)
Chairs:Tomohiro Shimizu (Kansai Univ.)
Kouichi Takase (Nihon Univ.)

Materials IV (11:00-12:20)
Chairs:Susumu Okada (Univ. of Tsukuba)
Kenzo Maehashi (Tokyo Univ. ofAgriculture and Technol. )16A-2-1 11:00
Single Polymer Chain Negative
Tone EUV Resist Utilizing
Crosslinking by Radical
Generation and Acid Amplification

16B-2-1 10:40
Area Selective Deposition:
Small Molecule Inhibition vs.
Inherent Selectivity (Invited)

16C-2-1 11:20
Reduced thermal impedance in
InP membrane lasers by
optimization of bonding process
on BCB

16D-2-1 11:00
Active-Matrix, Flexible X-ray
Detector Based on 2D Materials
Backplane

Bilal A. Naqvi 1, Satoshi Enomoto 2,
Kohei Machida 2, Yui Takata 3, Yusa
Muroya 3, Takahiro Kozawa 3 andDanilo De Simone 1, 1 imec, Belgium,
2 Toyo Gosei and 3 Osaka Univ.,Japan

Sean Barry, Carleton Univ., Canada

A. Zozulia 1, S. Rihani 2, G. Berry 2,
M. Robertson 2, J. Rawsthorne 2, K. A.
Williams 1 and Y. Jiao 1, 1 Eindhoven
Univ. of Technol., The Netherlands and2 Huawei Technologies Res. &Develop., UK-4-

Beom Jin Kim and Jong-Hyun Ahn,
Yonsei Univ., Korea

Room A (Eminence Hall) (2F)
+On-line
16A-2-2 11:20
Volume Compensating Materials
after Vapor Phase Infiltration:
Effect of Different Butyl Isomers ofPolymer Side-Chains on High
Process Temperature Durability

MNC 2023
Room B (Rose Room) (2F)

Room C (Crown Hall) (2F)

Room D (Clover Room) (2F)

16B-2-2 11:10
Competitive adsorption of DMZ
and TDMAT in composite oxide
atomic layer deposition
observed by IR absorption
spectroscopy

16C-2-2 11:40
Uniform 3D-Printed Micro/Nano
Structures via Pick-and-Place
Process

16D-2-2 11:20
Correlation between heat flow andelectrical current at dry-transferredfour layered MoS2

Tomohiro Mori 1, Hao Wang 2,3,
Takeshi Mori 1 and Joel K. W. Yang
2,4, 1 Industrial Technol. Center of
Wakayama Pref., Japan, 2 Singapore
Univ. of Technol. and Design,
Singapore, 3 Hunan Univ., China, and4 A*STAR, Singapore

Sota Nakamura 1, Kan Ueji 1 andKaiyao Zhou 1, Hiroyuki Nishidome 1,
Takashi Yagi 2, Yohei Yomogida 1,
Yasumitsu Miyata 1 and Kazuhiro
Yanagi 1, 1 Tokyo Metropolitan Univ.
and 2 AIST, Japan

16C-2-3 12:00
Reservoir-based in-sensor
computing device made of CNTPDMS nanocomposites

16D-2-3 11:40
Direct Synthesis of MoS2 and
WS2Se2-x on High-κ AlxTi1-xO
Using Mist CVD Toward Transferfree MOSFETs Devices

Norikatsu Sasao 1,2, Shinobu
Sugimura 1, Koji Asakawa 1, Tomoya
Oshikiri 2 and Masaru Nakagawa 2, 1
Kioxia and 2 Tohoku Univ., Japan

Haruto Suzuki, Ryo Miyazawa,
Masanori Miura and Fumihiko
Hirose, Yamagata Univ., Japan

16A-2-3 11:40
High-performance nanoimprinted
HfO2 sensing film for solid-state
pH sensors

16B-2: 11:30-11:40
Author's Interview

Tung-Ming Pan 1,2, Shih-Ting Chuang
1, Chi-Lin Chan 1 and Jim-Long Her 1,
1 Chang Gung Univ. and 2 Chang
Gung, Memorial Hospital, Taiwan

Kouki Kimizuka 1, Saman Azhari 1,2,
Shuhei Ikemoto 1, Yuki Usami 1 andHirofumi Tanaka 1, Kyushu Inst. Tech.
and 2 Waseda Univ., Japan

16A-2: 12:00-12:10
Author's Interview

16C-2-4 12:20
A mechanism for cryogenic
etching of SiO2 using CF4/H2 andHF plasmas based on in-situ
monitoring techniques

16D-2-4 12:00
Spatial and remote charge density
modulation method for MoS2
using periodically polarization
inversed MgO: LiNbO3

Shih-Nan Hsiao 1, Yusuke Imai 1,
Makoto Sekine 1, Nikolay Britun 1,
Michael K. T. Mo 1, Yuki Iijima 2,
Ryutaro Suda 2, Yoshinobu Ohya 2,
Yoshihide Kihara 2 and Masaru Hori 1,
1 Nagoya Univ. and 2 Tokyo Electron
Miyagi, Japan

Kaipeng Rong 1, Ryosuke Noro 2,
Hayato Nishigaki 2, Mingda Ding 2,
Yao Yao 2, Taiki Inoue 2, Ryuji
Katayama 2, Yoshihiro Kobayashi 2,
Kazunari Matsuda 3 and Shinichiro
Mouri 1, 1 Ritsumeikan Univ., 2 Osaka
Univ. and 3 Kyoto Univ., Japan

Abdul Kuddus 1, Kojun Yokoyama 2,
Keiji Ueno 2 Shinichiro Mouri 1,3 andHajime Shirai 2, 1 Ritsumeikan Univ.
and 2 Saitama Univ., Japan

16C-2: 12:40-12:50
Author's Interview
Lunch Time
16B-3: Symp. D. Lipid Membrane 16C-3: Nanomaterials and

16D-2: 12:20-12:30
Author's Interview

physical limit for lithography anddevices: Are we ready to boost thescaling roadmap? IV (13:30-15:00)
Chairs:Toru Fujimori (FUJIFILM)
Julius Santillan (AIST)

Micro and Nanotechnology I(13:30-14:30)
Chairs:Kazuaki Furukawa (Meisei Univ.)
Atsushi Miura (Hokkaido Univ.)

nanostructures I (13:30-15:00)
Chairs:Kazuto Hatakeyama (Kumamoto
Univ.)
Shu Nakaharai (Tokyo Univ. ofTechnol.)

Chairs:Akio Higo (Univ. of Tokyo)
Yuuichiro Mitani (Tokyo City Univ.)

16A-3-1 13:30
Low Stochastics for Extreme UVPatterning: Photoresists with
precise molecular weight,
composition and sequence (Invited)

16B-3-1 13:30
Integrated model membrane forbiophysical studies andbiomedical applications (Invited)

16C-3-1 13:30
Functionalization of Group IV
Semiconductor Nanowire
Channels (Invited)

Kenichi Morigaki, Kobe Univ., Japan

Naoki Fukata 1,2, 1 NIMS and 2 Univ.
of Tsukuba, Japan

16D-3-1 13:30
Room temperature operation of
spin-functional optical devices
based on 0D-2D hybrid
semiconductor nanostructures(Invited)

16A-3: Symp. A. Challenge to the

Florian Kaefer 1, Chenyun Yuan 1,
Christopher Ober 1, Cameron Adams
2, Rachel Segalman 2, 1 Cornell Univ.,
and 2 UC Santa Barbara, USA

16A-3-2 14:00
Relationship between shot noise(stochasticity) and diffusion(smoothing) in resist processes for
extreme ultraviolet lithography(Invited)
Takahiro Kozawa, Osaka Univ., Japan

16A-3-3 14:30
Functional surface treatment
primer (FSTP) toward High NA
EUV lithography (Invited)
Wataru Shibayama, Shuhei Shigaki,
Satoshi Takeda, Kodai Kato,
Makoto Nakajima and Rikimaru
Sakamoto, Nissan Chemical, Japan

16D-3: Nano-devices I (13:30-15:00)

Akihiro Murayama and Satoshi Hiura,
Hokkaido Univ., Japan

16B-3-2 14:00
Fluorescence Single Molecule
Tracking in Biomembranes and
Its Application to Material
Sciences (Invited)

16C-3-2 14:00
Gold Nanopearl Arrays Allow
Ultrasensitive Portable SurfaceEnhanced Raman Spectroscopy
for Clinical Applications

Ryugo Tero, Toyohashi Univ. ofTechnology, Japan

Dehui Wan, Natl. Tsing Hua Univ.,
Taiwan16C-3-3 14:20
Surface and interfaces ofinorganic nanolayers
Chia-Wei Huang 1, Tang-Yu Lai 2 andTe-Hua Fang 1, 1 Natl. Kaohsiung
Univ. of Sci. and Technol. and 2 Air
Force Academy, Taiwan

16D-3-2 14:00
Few-electron quantum dots insilicon-based single electrontransistor
Yunxiang Zhang, Mariam Alhammadi
and Dr Nathan Johnson, Univ. College
London, UK

16D-3-3 14:20
Aggregation Effect of Au Thin Film
Catalysts on Controlling SelectiveArea VLS Growth of Ge
Nanowires on Si (111)
Shohei Okuda 1, Shuma Yuzawa 1,
Michiharu Makino 1, Wipakorn
Jevasuwan 2, Naoki Fukata 2 andShinjiro Hara 1, 1 Hokkaido Univ. and2 NIMS, Japan

16C-3-4 14:40
Strain and Optical Characteristics
Analyses of 3-Dimentional SelfOrdered Multilayered SiGe
Nanodots by PL and Raman
Spectroscopy

16D-3-4 14:40
Designs of SiC PiN diodes withedge terminations using P-typeepitaxial layers

16C-3: 15:00-15:10
Author's Interview

16D-3: 15:00-15:10
Author's Interview

Yuta Ito 1, Ryo Yokogawa 1, Wei-Chen
Wen 2, Yuji Yamamoto 2, Takuya
Minowa 1 and Atsushi Ogura 1, 1 Meiji
Univ., and 2 IHP, Japan-5-

Sangyeob Kim, Sumin Park, Hyowon
Yoon, Jinhun Kim and Ogyun Seok,
Kumoh Natl. Inst. of Technol., Korea

Lobby (2F)
Coffee Break
16P-1: Poster Session I (14:00-16:00, Nov. 16), Room P (Eminence Hall) (2F)MNC 2023

16P-1: Nanocarbons & 2D Materials Chair: Yasumitsu Miyata (Tokyo Metropolitan Univ.)

16P-1-1
Switching Effects and Conductivity
Characterization of C60 Chains

16P-1-2
Two-dimensional Van der Waals
Magnetic Lateral Junction with
V-doped MoS2 and WS2

16P-1-3
MoS2-based active array for highresolution monitoring of brain
activity

16P-1-4
Phantom Brain Model for Imitationof Human Brain and Rollable
Graphene Electrode Array

Whan Kyun Kim 1,2, Namgun Kim
1,2, Van Tu Vu 1 and Woo Jong Yu
1, 1 Sungkyunkwan Univ. and 2
Samsung Electronics, Korea

Duo Xu and Jong-Hyun Ahn, Yonsei
Univ., Korea

Hyeryeong Lee and Jong-Hyun Ahn,
Yonsei Univ., Korea

16P-1-5
Development of a multi-channel
measurement system forgraphene-based sensor array todetect heavy metals

16P-1-6
Delaminated MnPS3 withmultiple layers coupled with Si
featuring ultrahigh UVphotodetection performances

16P-1-8
Electrical detection of amine gas
at the parts per billion level usinggraphene field-effect transistors
with ionic liquid

Takashi Ikuta, Tomoya Yoshii, Kazuki
Kikawada, Fuka Nishitsugu and Kenzo
Maehashi, Tokyo Univ. of Agriculture
and Technol., Japan

Tsung-Yen Wu and Chia-Yuan
Chen, National Cheng Kung Univ.,
Taiwan16P-1-7
Charge Transfer Doping for PType 2D-FETs by Self Assembled
Organic Monolayer Deposition
and Use as Seed Layer in ALD
Process

16P-1-9
Photoactivated response to NH3
of gas sensor based on Coporphyrin modified MoS2

16P-1-10Fabrication and characterizationof FETs with TMDC thin film aschannel for realization of
portable speciation devices

16P-1-11Fabrication of flexible carbon
nanotube thin-film transistors withasymmetric-gate structure by selfalign process

Hiroki Waizumi 1,2, Tsuyoshi
Takaoka 2, Atsushi Ando 1,
Toshitaka Kubo 1 and Tadahiro
Komeda 2, 1 AIST and 2 Tohoku
Univ., Japan

Shuta Hori 1, Haruki Uchiyama 1,
Hiromichi Kataura 2 and Yutaka Ohno
1, 1 Nagoya Univ. and 2 AIST, Japan

16P-1-14
Electronic-structure tuning ofmultilayer graphene by aperpendicular electric field andstacking arrangement

16P-1-15
Twist angle dependence ofgraphene-stacked junction
characteristics

16P-1-16
Layer thickness dependence on
the mechanical properties ofaerographite microparticles

Nadia Sultana, Yanlin Gao, Mina
Maruyama and Susumu Okada,
Univ. of Tsukuba, Japan

Hayate Murakami 1, Fumiya
Fukunaga 1, Motoki Ohi 1, Kosuke
Kubo 1, Takeru Nakagawa 1, Hiroyuki
Kageshima 2, Yasuhide Ohno 1 andMasao Nagase 1, 1 Tokushima Univ.
and 2 Shimane Univ., Japan

Yuexuan Li and Kaori Hirahara, Osaka
Univ., Japan

16P-1-18
Realization of vertical n- and pTFET with ambipolar MoTe2
using MoTe2/p-Ge and MoTe2/nSi heterostructures

16P-1-19
Fabrication of Highly Conductive
Polyester Fabrics using SingleWall Carbon Nanotubes Inks for
EMI Shielding

16P-1-20
Detection of antigens exceeding
the Debye screening length using
epitaxial graphene FET on SiC
substrates

Yuga Nakamura 1, Xueyang Han 2,
Nobuyuki Aoki 1 and Mengnan Ke 1,
1 Chiba Univ. and 2 Univ. of Tokyo,
Japan

Yuito Horita 1, Taiki Fukase 1, Hibiki
Kisaka 1, Sho Kuromatsu 1, Yusuke
Sato 2, Kazuyuki Endo 2, Takeshi
Watanabe 1, Ryosuke Suga 1 andShinji Koh 1, 1 Aoyama Gakuin Univ.
and 2 NIHON PLAST, Japan

Keita Murayama 1, Yasuhide Ohno 1,
Taira Kajisa 2 and Masao Nagase, 1
Tokushima Univ. and 2 Toyo Univ.,
Japan

16P-1-22
Chemical etching of silicon in avapor phase assisted by thin
MoS2 crystals

16P-1-23
Nanodot Formation on Si andPolyimide by Using PS-PDMS
Blockcopolymer

Kaichi Yamamoto, Toru Utsunomiya,
Takashi Ichii and Hiroyuki Sugimura,
Kyoto Univ., Japan

Yuya Kuwabara, Yuki Hirota, Sho Ishii,
Takashi Akahane and You Yin, Gunma
Univ., Japan

16P-1-24
Single Crystal Formation of
Aluminum Diboride andElectrocatalytic Synthesis ofAmmonia

Masato Takei 1,2, Hiroshi Suga 1,2,
Takatsugu Wakahara 2, Katsunori
Wakabayashi 3, Susumu Okada 4 andKazuhito Tsukagoshi 1,2, 1 Chiba Inst.
of Technol., 2 NIMS, 3 Kwansei
Gakuin Univ. and 4 Univ. of Tsukuba,
Japan

Koutaro Fujii 1, Shu Nishimura 1,
Hiroshi Tabata 1, Osamu Kubo 1,2,
Osamu Maida 1 and Mitsuhiro
Katayama 1, 1 Osaka Univ. and 2 Gifu
Univ., Japan

16P-1-13
Carrier Transport Simulations in
Twisted Bilayer and Turbostratic
Multilayer Graphene Systems
Seyed Ali Mojtahedzadeh, Hajime
Tanaka and Nobuya Mori, Osaka
Univ., Japan

16P-1-17
Graphene Growth on a W probe
by Solid Phase Reaction for the
In-situ TEM Visualization of Li
Intercalation in Charge/Discharge
Process
Giri Suresh 1, Wei Ming Lin 1,
Vikaskumar Gupta 1, Giri Suresh 1,
Yazid Yaakob 2 and Masaki Tanemura
1, 1 Nagoya Inst. of Technol., Japanand 2 Univ. Putra Malaysia, Malaysia

Daisuke Horiba, Takuya Kojima, Kohei
Sakanashi, Mengnan Ke andNobuyuki Aoki, Chiba Univ., Japan

Kazuki Kikawada, Takashi Ikuta andKenzo Maehashi, Tokyo Univ. of Agri.
and Technol., Japan

16P-1-12 Withdrawn
Nano Photonics in Nonlinear 2D
Materials
Alexander Solntsev, Univ. of Technol.
Sydney, Australia

16P-1-103L
Direct surface passivation of
MXene transparent conductive
films via vaper phase reaction
using silane coupling agents
Yuki Shibata, Atsumi Tsutakabe, Chen
Zhao and Haruka Omachi, Nagoya
Univ., Japan
16P-1: Nanofabrication Chai: Hirofumi Tanaka (Kyushu Inst. of Technol.)

16P-1-21
Physical Reservoir Using a Agdoped Ta2O5 Thin Film
Risa Gobara, Tatsuya Itoh, Yuna
Kanda, Taisuke Hayashi and Tsuyoshi
Hasegawa, Waseda Univ., Japan-6-

Kazuki Nashimoto 1, Yoshiko
Horiguchi 2, Akichika Kumatani 1,2,3
and Takeru Okada 1, 1 Tohoku Univ., 2
Univ. of Tokyo and 3 JST-PRESTO,Japan

MNC 2023
16P-1: Poster Session I (14:00-16:00, Nov. 16), Room P (Eminence Hall) (2F)
16P-1-25
O-Doped GeTe Chalcogenide forHigh-Performance Phase-Change
DeviceShunsuke Yahagi, Mutsumi Miuchi,
Shota Yoshimoto, Taiki Miyata, Takao
Fujiwara and You Yin, Gunma Univ.,
Japan

16P-1-29
Metal-insulator phase transition in
VO2 transistors
T. Hatano 1, H. Yamamoto 2, A.
Fukawa 1, K. Akiba 2, S. Demura 1
and K. Takase 1, 1 Nihon Univ. and 2
QST, Japan

16P-1-26
Correlation between thereservoir computing
performance and nonlinear
property of an Ag/Ag2S
nanoparticle random network

16P-1-27
A planar single-walled carbon
nanotube/tetratolylporphyrinrandom network device withintrinsic non-linear fading-memory
property

Dang Thien Tan, Oradee Srikinkaew,
Banerjee Deep, Yuki Usami,
Hirofumi Tanaka, Kyushu Inst. ofTechnol., Japan

Deep Banerjee 1, Yuki Usami 1,
Hiroyuki Furuta 2,3 and Hirofumi
Tanaka 1, 1 Kyushu Inst. Technol., 2
Ritsumaiken Univ. and 3 Kyushu Univ.,
Japan

16P-1-30
Quantized conductance in a
NiO-based ReRAM and its
magnetic field dependence

16P-1-31
Development of a Cu2S island
network reservoir

Riku Takagi and Tsuyoshi
Hasegawa, Waseda Univ., Japan

Masaru Hayakawa and Tsuyoshi
Hasegawa, Waseda Univ., Japan

16P-1-28
Research on tactile sensation
using pressure sensors and a
Ag2S reservoir
Kaiki Yoshimura and Tsuyoshi
Hasegawa, Waseda Univ., Japan

16P-1-32
Surface-enhanced Raman
scattering device using molecularlithography method
M. Hosoi 1, Y. Kasai 1, T. Hagihara 1,
T. Tokunaga 1, K. Kabasawa 1, T. Ukai
1, S. Kurosu 1, Y. Kusama 1, K.
Yanagisawa 1,2, T. Hanajiri 1, T.
Maekawa 1 and R. Negishi 1, 1 Toyo
Univ. and 2 NIMS, Japan

16P-1-33
Microphase-separated structureswith 3 nm periodicity from discretesugar-inorganic block copolymers

16P-1-34
Study of the Au doped HfOxReRAM device as an artificial
synaptic device.

16P-1-35
In-materio reservoir computing
composed of functionalized
single-walled carbon nanotube

16P-1-36
Simulation of Short-term Memoryin Atomic Switch Network
Reservoirs

Taiki Nishimura 1, Feng Li 1, Takuya
Yamamoto 1, Keiji Tajima 1, Redouane
Borsali 2, Hsin-Lung Chen 3, Toshifumi
Satoh 1 and Takuya Isono 1, 1
Hokkaido Univ., Japan, 2 Univ.
Grenoble Alpes, France, 3 Natl. Tsing
Hua Univ., Taiwan

M. Tanaka, C.Y. Huang, S. Okayasu,
T. Shimizu, T. Ito and S. Shingubara,
Kansai Univ., Japan

Yuki Usami and Hirofumi Tanaka,
Kyushu Inst. of Technol., Japan

Yusuke Murase and Tsuyoshi
Hasegawa, Waseda Univ., Japan

16P-1-37
Detection of Moving Light Using a
Ag2S Reservoir

16P-1-38
Influence of Unique Behaviors in
an Atomic Switch Operation on
Hardware-Based Deep Learning

16P-1-39
Cross Metal-Insulator-Metal Diodewith Hydrogen Silsesquioxane
Nanolayer

Keita Tomatsuri and Tsuyoshi
Hasegawa, Waseda Univ., Japan

Sho Ishii, Takashi Akahane, Yuya
Kuwabara, Guida Lin and You Yin,
Gunma Univ., Japan

16P-1-40
MoSe2/SWNT hybrid withnonlinear dynamics towards inmaterio reservoir computing
device16P-1-42
Evaluation of physical reservoir
computing with bismuth sulfide

16P-1-43 Withdrawn
Various periodic nanotube
fabrication methods via obliqueangle deposition and direct
printing

Risa Matsuo and Tsuyoshi Hasegawa,Waseda Univ., Japan

16P-1-41
Fabrication and performance of
UV detection of ZnO 2D inverse
opal structure using a selforganization technique
Kota Minamiyama, Takeshi Ito, Shoso
Shingubara and Tomohiro Shimizu,
Kansai Univ., Japan

16P-1-45
Fabrication of nickel oxide thinfilms for photocathodes throughwet and gas phase processes

Masaya Hakoshima, Yuki Usami and
Hirofumi Tanaka, Kyushu Inst. ofTechnol., Japan

Sucheol Ju, Chanwoong Park,
Wonjoong Kim, Jaemin Park and Heon
Lee, Korea Univ., Korea

16P-1-46
Development of In-materio
reservoir computing bysandwiched organic film device

16P-1-104L
IZO/ZnO Nanowire
Heterostructure Synthesis and its
Biosensing Application

Tomoya Oshikiri 1, Takashi
Yusuke Nakaoka, Yuki Usami and
Katsurahara 1, Noriko Kubota 1,
Hirofumi Tanaka, Kyushu Inst. of
Hiromasa Niinomi 1, Yasutaka Matsuo
Technol., Japan
2, Hiroaki Misawa 2,3, Masaru
Nakagawa 1, 1 Tohoku Univ., 2
Hokkaido Univ., Japan and 3 Natl.
Yang Ming Chiao Tung Univ., Taiwan
16P-1: Organic Nanomaterials Chair: Akito Masuhara (Yamagata Univ.)

Da Ye Kim, June Soo Kim, Maeum
Han, Jae Yong Lee, Seung Deok Kim,
Hyunjun Kim, Noah Jang, Jiajie Wangand Seong Ho Kong, Kyungpook Natl.
Univ., Korea

16P-1-47
Observation of Franz-Keldysh’s
Modulation in a Quasi-twodimensional Perovskite Crystal by
Femtosecond Transient
Absorption Microscopy

16P-1-49
Emission control of a polarazobenzene in the aggregatedstate

Tetsuro Katayama 1,2, Yuichi Ikura 1
and Akihiro Furube 1, 1 Tokushima
Univ. and 2 JST-FOREST, Japan

16P-1-51
Effect of magnetic field strength
on shrinking ratio of thermo-andmagnetic-responsive gels
Naoki Okada, Junpei Sakurai, Seiichi
Hata and Chiemi Oka, Nagoya Univ.,
Japan

16P-1-48
Shear-Induced Anisotropic
Conductivity of Lyotropic Liquid
Crystalline Self-Doped
Polythiophene in Thin Films
Motoaki Onishi 1, Yuya Ishizaki 1,
Hirokazu Yano 2, Hidenori Okuzaki 3
and Shusaku Nagano 1, 1 Rikkyo
Univ., 2 Tosoh, 3 Univ. of
Yamanashi, Japan

Eriko Machida, Mitsuaki Yamauchi and
Sadahiro Masuo, Kwansei Gakuin
Univ., Japan

16P-1-52
Formation and Nonlinear I-V
properties of Poly(3-hexyl
thiophene)-Gold Nanoparticle
Monolayer Networks

16P-1-53
Out-of-Plane Orientation
Properties and Lithium Ion
Conductivity in Side-Chain Liquid
Crystalline Polymer Thin Films

Taikai Matsuda, Yuya Ishizaki andShusaku Nagano, Rikkyo Univ.,Japan

Mahiro Shimada 1, Yuya Ishizaki 1,
Mitsuo Hara 2, Takahiro Seki 2 andShusaku Nagano 1, 1 Rikkyo Univ and2 Nagoya Univ., Japan-7-

Alif Syafiq Kamarol Zaman, Yuki
Usami and Hirofumi Tanaka, Kyushu
Inst. of Technol., Japan

16P-1-44
Magnetic properties of MnOnanoparticles
Takuto Nakazawa, Akihiro Fukawa,
Josuke Tamura, Chiehisa Takeoka,
Kazane Ito, Zijie Feng and Kouichi
Takase, Nihon Univ., Japan

16P-1-105L Withdrawn
Magnetic properties of In2O3
islands prepared by MBE
Chiehisa Takeoka, Akihiro Fukawa,
Takuto Nakazawa, Josuke Tamura andKouichi Takase, Nihon Univ., Japan

16P-1-50
Study of synaptic PEDOT:PSS
wire in electrolyte solutions
Seiya Watanabe 1, Naruki Hagiwara 2,
Hiroaki Shibakita 1, Yang Zhou 1,
Hiroyuki S. Kato 1 and Megumi AkaiKasaya 1,2, 1 Osaka Univ. and 2
Hokkaido Univ., Japan

16P-1-54
Reservoir computing with
conductive polymer wire
Ryosuke Nakajima 1, Seiya Watanabe
1, Hiroyuki S. Kato 1 and Megumi
Akai-Kasaya 1,2, 1 Osaka Univ. and 2
Hokkaido Univ., JapanMNC 2023
16P-1: Poster Session I (14:00-16:00, Nov. 16), Room P (Eminence Hall) (2F)
16P-1-55
Synthesis and Porous Thin Film
Formation of SilsesquioxaneContaining Liquid Crystalline
Block Copolymers

16P-1-56
Perovskite quantum dots withalkali metal-containing ligands
for light-emitting diodeapplications

Kotaro Morimoto, Yuya Ishizaki andShusaku Nagano, Rikkyo Univ., Japan

Yusaku Morikawa 1, Ryota Sato 1,
Takayuki Chiba 1, Satoshi Asakura
2, Motofumi Kashiwagi 3 and Akito
Masuhara 1, 1 Yamagata Univ., 2 Ise
Chem. and 3 ZEON, Japan

16P-1-57
Synthesis and photo-alignment of
POSS-containing microphaseseparated structure in photoresponsive liquid crystal block
copolymers thin film

16P-1-58
Output characteristics of a biofuel
cell that uses cellulase to
decompose cellulose nanofibers
and plant leaves into sugars as
fuel

Shoto Suzuki 1, Yuya Ishizaki 1,
Mitsuo Hara 2, Takahiro Seki 2 andShusaku Nagano 1, 1 Rikkyo Univ.
and 2 Nagoya Univ., Japan

Kazuki Iwata, Koki Someya andSatomitu Imai, Nihon Univ., Japan

16P-1-59
Study on hydrogen radical reactions
in a functional self-assembled
monolayer: Examination of potentialof charge transfer
Mizuiho Muroyama 1, Seiya Watanabe
1, Yusuke Kanematsu 2, Masanori
Tachikawa 3, Megumi Akai-Kasaya 1
and Hiroyuki S. Kato 1, 1 Osaka Univ.,
2 Hiroshima Univ. and 3 Yokohama
City Univ., Japan
16P-1: Nano Surfaces, Interfaces, and Advanced Microscopy Chair: Takayuki Hoshino (Nagoya Univ.)

16P-1-60
Evaluation Methods for UnderSampled Scanning Probe
Microscopy with Feature
Correlation

16P-1-61
Multidimensional Engineering ofCesium-based Perovskite
Materials and Device
Performance

Keiichi Ueda 1,2, Zhuo Diao 2, Linfeng
Hou 2, Hayato Yamashita 2 andMasayuki Abe 2, 1 Tokyo Metropolitan
Industrial Technol. Res. Inst. and 2
Osaka Univ., Japan

Gaukhar Nigmetova 1, Zhuldyz
Yelzhanova 1, Gulzhan Bizhanova 1,
Hryhorii Parkhomenko 1, Meruyert
Tilegen 1, Damir Aidarkhanov 1,
Vladimir Pavlenko 1,2, Chang Keun
Lim 1, Askhat Jumabekov 1, Tri
Pham 1, Mannix Balanay 2 andAnnie Ng 1, 1 Nazarbayev Univ. and2 Al-Farabi Kazakh Natl. Univ.,
Kazakhstan

16P-1-64
Energy-level alignment of Ru
complexes placed in multi-layers
by frequency modulated EFM
combined with Fowler-Nordheim
tunneling spectroscopy

16P-1-65
Electronic structure of fullerene
derivative thin films with gold
dopingMasahiro Nakayama, Takashi
Yamada, Hiroshi Ohoyama andTakuya Matsumoto, Osaka Univ.,
Japan

Taiga Hirota, Dong Han, Tomoki
Misaka, Hiroshi Ohoyama, Takashi
Yamada and Takuya Matsumoto,
Osaka Univ., Japan

16P-1-62
Fabrication methods for
microstructures to reduce thesurface energy of metals
Woong Ki Jang, In Sik Choi, Young Ho
Seo and Byeong Hee Kim, Kangwon
Natl. Univ., Korea

Takaaki Mano and Akihiro Ohtake,
NIMS, Japan

16P-1-66
Atomic Structures and Chemical
States for Active and Inactive
Dopant Sites in Mg- and SiDoped GaN

16P-1-67
Electrohydrodynamic flow-based
size separation for graphene
oxide particles induced by virtual
cathode

Yoshiyuki Yamashita 1,2, Jingmin Tang
1,2, Yusuke Hashimoto 3 andTomohiro Matushita 3, 1 NIMS, 2
Kyusyu Univ. and 3 Nara Inst. of Sci.
and Technol., JapanKen Sasaki and Takayuki Hoshino,
Hirosaki Univ., Japan

16P-1-68
Nanoscale interface-engineeredPoly(4-vinylphenol) grafted microsized porous silicon particles asimproved lithium storage anodematerials

16P-1-69
Designing Shape of VirtualCathode Pattern for Nano
Robotics

16P-1-71
Fabrication of Hydrophobic
Nanostructures by Injection
Molding Using Gas-Permeable
Mold

16P-1-72
Fabrication of water droplet
control film with patterning ofhydrophilic and hydrophobic
regions

16P-1-73
Fabrication of high aspect ratio
polymer mold using patterntransferred silver as a dry etchingmask

Sayaka Miura 1, Rio Yamagishi 1,
Naoto Sugino 2, Yoshiyuki Yokoyama
3, Mano Ando 1, Yuna Hachikubo 1
and Satoshi Takei 1, 1 Toyama Pref.
Univ., 2 Sanko Gosei and 3 Toyama
Industrial Technol. Res. and Develop.
Center, JapanT. Wakasa and J. Taniguchi, Tokyo
Univ. of Sci., Japan

K. Enomoto and J. Taniguchi, Tokyo
Univ. of Sci., Japan

16P-1-75
Damage-free Assembly of
Photosynthetic Microbes with
Optical Condensation using
Microlens Array for Enhancing
Photoelectric Conversion

16P-1-76
Polystyrene Sulfonate-Grafted
Porous Si with Polyaniline
coating for Improved Lithium
Storage Anode Materials

16P-1-77
Atmospheric plasma treatment forlarge diameter wafer level
imprinting

Kain Ichinohe, Ken Sasaki and
Takayuki Hoshino, Hirosaki Univ.,
Japan

16P-1-63
InSb growth on GaAs (111)A:
Effects of InAs interlayer

16P-1-70
Surfaceinformationdetectionofsca
nningprobe
microscopytopographydataviaCo
mpositeNetwork

Zhuo Diao 1, Keiichi Ueda 1,2, Linfeng
Mahesh Naikwade, Ye Chan Lee,Hou 1 and Masayuki Abe 1, 1 Osaka
Abhijit Kadam and Sang-Wha Lee,
Univ. and 2 Tokyo Metropolitan
Gachon Univ., Korea
Industrial Technol. Res. Inst., Japan
16P-1: Nanoimprint, Hybrid-NIL, Biomimetics, and Functional Surfaces Chair: Jun Taniguchi (Tokyo Univ. of Sci.)

Ryuki Hotta 1, Kota Hayashi 1, Anna
Honda 1, Mamoru Tamura 2, Takuya
Iida 1 and Shiho Tokonami 1, 1 Osaka
Metropolitan Univ. and 2 Osaka Univ.,Japan

Yechan Lee, Mahesh Naikwade andSang-wha Lee, Gachon Univ., Korea

Chih-Sheng Chang and Fuh-Yu
Chang, Natl. Taiwan Univ. of Sci. andTechnol., Taiwan-8-16P-1-74
The effects of periodic diffraction
textured substrate for theconversion efficiency of DSSCs
Ryutaro Kimura, Chiemi Oka, Seiichi
Hata and Junpei Sakurai, Nagoya
Univ., Japan

16P-1-78
FABRICATION OF MICRO-SUB
MICRON HIERARCHICALSTRUCTURES ON CERAMICSHEET SURFACES AND INPLANE COMPRESSION
Ryoma Taira and Fujio Tsumori,
Kyushu Univ., JapanMNC 2023
16P-1: Poster Session I (14:00-16:00, Nov. 16), Room P (Eminence Hall) (2F)
16P-1-79
Thickness of surface silicon oxide
layer affecting liquid spreading ata nanogap for UV nanoimprint
lithography
Masaru Nakagawa 1, Akiko Onuma 1,
Hiromasa Niinomi 1, Shintaro Itoh 2,
Kenji Fukuzawa 2 and Toshiya Asano3, 1 Tohoku Univ., 2 Nagoya Univ. and3 Canon, Japan

16P-1-80
Observation of wetting by
capillary condensation of photocurable liquid in nanogaps andits effect on cavity filling in
nanoimprinting
Masato Suzuki 1, Shintaro Itoh 1,2,
Yusuke Nakanishi 1, Kenji
Fukuzawa 1, Masaru Nakagawa 3,
Toshiya Asano 4, Naoki Azuma 1,5and Hedong Zhang 1, 1 Nagoya
Univ., 2 JST-PREST, 3 Tohoku Univ.,
4 Canon and 5JST-ACT-X, Japan

16P-1-81
Fluorescent Mesoporous Silica
Nanocarriers Coated with
Polydopamine for Sustained
Release of Flavonoid Drugs

16P-1-82
Smart process window proposal
system for demanded conditionsin nanoimprint assisted by deeplearning

Taelin Kim, A Yeon Cho, Vo Thi BichNgoc, Hyun Jong Lee and Sang Wha
Lee, Gachon Univ., Korea

Yuusei Kunitou, Toshiaki Tanaka,
Masaaki Yasuda and Yoshihiko Hirai,
Osaka Metropolitan Univ., Japan

16P-1-83
Non-residual-layer nanopatterntransfer using a replica mold withsilver on the convex partY. Nakamura and J. Taniguchi, Tokyo
Univ. of Sci., Japan
16P-1: BioMEMS, Lab on a Chip, and Nanobiotechnology Chair: Shigeyasu Uno (Ritsumeikan Univ.)

16P-1-84
Fabrication of Ring-Shaped MultiBiosensor for in vitro Embryo
Evaluation and Measurement of
Weight Detection Sensitivity
Hayato Sone 1, Kanto Arai 1, Keisuke
Wada 1, Riho Kakinuma 1, Akiko Saito
2, Hui Zhang 1 and Toshiya Sakata 2,
1 Gunma Univ. and 2 Univ. of Tokyo,
Japan

16P-1-88
Integration of Graphene-based
Resonant Mass Sensor and PIN
Photodiode for On-Chip
Measurement
T. Nakagawa, K. Arano, L.P. Anh, T.
Hizawa, D. Akai, Y. Noda, Y.J. Choi, T.
Noda, K. Sawada and K. Takahashi,
Toyohashi Univ. of Technol., Japan

16P-1-92
Preparation of piezoelectric
nanofiber films and theirapplication to mechanosensors
Kota Nishino 1, Hiroaki Takehara 1,2
and Takanori Ichiki 1,2, 1 Univ. ofTokyo and 2 iCONM, Japan

16P-1-85
High-performance ZnInxOy
sensing membranes on flexible
PEN by chemical solution
method for solid-state pH
sensors

16P-1-86
Detection of SARS-CoV-2 in
Saliva by Integrated Graphene
FET Array

16P-1-87
Developing a MEMS reservoircomputer for real-time epileptic
seizure detection

Kaori Yamamoto 1, Natsuki Sato 1,
Mamiko Yano 1, Kiyozi Sakano 1,
Takao Ono 1, Yasushi Kanai 1, Shota
Ushiba 2, Naruto Miyakawa 2, Ayumi
Shinagawa 2, Shinsuke Tani 2,
Masahiko Kimura 2, Yohei Watanabe
3, Shinichi Nakakita 4, Hidekazu
Tanaka 1 and Kazuhiko Matsumoto, 1
Osaka Univ., 2 Murata Manufacturing,
3 Kyoto Pref. Univ. of Medicine and 4
Kagawa Univ., Japan

Amit Banerjee, Shuto Kawaguchi,
Claude Meffan, Jun Hirotani and
Toshiyuki Tsuchiya, Kyoto Univ., Japan

16P-1-90
Quantitative evaluation ofdielectrophoretic separation
efficiency of cancer exosomes
based on fluorescence imaging

16P-1-91
The Possibility of Ultrasensitive
Detection of Biomolecules using
Silicon Nanowire Biosensor with
Structural Optimization

Ryu Nakabayashi, Rie Koyama,
Masafumi Inaba, Michihiko Nakano
and Junya Suehiro, Kyushu Univ.,Japan

Hui Zhang 1, Mayuna Abe 1, Fumiya
Osawa 1, Yawei Qiu 1, Noriyasu
Ohshima 1, Taira Kajisa 2, Toshiya
Sakata 3, Takashi Izumi 4 and Hayato
Sone 1, 1 Gunma Univ., 2 Toyo Univ.,
3 Univ. of Tokyo and 4 Teikyo Heisei
Univ., Japan

16P-1-93
Rapid and Specific Detection of
Disease Marker Bionanomaterials with Microflowmediated Optical Condensation

16P-1-94
Acceleration of DNA Double
Strand Formation by
Photothermal Assembly with
Nano-bowl Substrate

16P-1-106L
Droplet digital isothermal
amplification for quantitative
detection of target RNA in a
microfluidic chip

Koki Komori 1, Kana Fujiwara 1,
Mami Katsumata 1, Yumiko Takagi
1, Mamoru Tamura 1,2, IkuhikoNakase 1, Shiho Tokonami 1,
Takuya Iida 1, 1 Osaka Metropolitan
Univ. and 2 Osaka Univ., Japan

Ryoma Hasegawa, Masatoshi
Kanoda, Kota Hayashi, Shuichi
Toyouchi, Mamoru Tamura, Shiho
Tokonami and Takuya Iida, Osaka
Metropolitan Univ., JapanJi Wook Choi and Bong Geun Chung,
Sogang Univ., Korea

Tung-Ming Pana 1,2, Ruey-Torng
Kao 1, Yen-Hsiang Huang 1 andHsuan-Ling Kao 1, 1 Chang Gung
Univ. and 2 Chang Gung Memorial
Hospital, Taiwan

16P-1-89
Development of a microfluidic
device for three-dimensional cell
culture under chemical gradients
Suguru Sugiyama, Hirai Sudo andKosuke Tsukada, Keio Univ., Japan

16P-1-107L
Wireless wavelength measurement
system with temperaturecompensation using filter-freewavelength sensor
I.H. Kwon, Y.J. Choi, T. Ide, K.
Takahashi, T. Noda, and K. Sawada.
Toyohashi Univ. of Technol., Japan
16P-1: Atomic Layer Processing (ALP) Chair: Fumihiko Hirose (Yamagata Univ.)

16P-1-95
Vertical structured organicinorganic EUV Photoresist
fabricated by Atomic Layer
Deposition and Molecular Layer
Deposition
Hyeonseok Ji, Jaehyuk Lee, Chaerim
Kim, Sangmin Lee and Myung Mo
Sung, Hanyang Univ., Korea

16P-1-96
Aluminum-silicate coatedtitanium-oxide-channel-thin-film
transistors as cation sensors
Ryo Miyazawa, Hibiki Takeda,
Ryusei Sato, Haruto Suzuki,
Masanori Miura, Bashir Ahmmad
and Fumihiko Hirose, Yamagata
Univ., Japan

16P-1-97
Gas barrier films of aluminum andtitanium oxides deposited byroom-temperature atomic layer
deposition
Ryusei Sato, Ryo Miyazawa, Masanori
Miura, Bashir Ahmmad and Fumihiko
Hirose, Yamagata Univ., Japan-9-

16P-1-98
Organic-inorganic hybrid artificial
solid electrolyte interphase using
MLD-ALD
Chaerim Kim, Hyeonseok Ji, Jaehyuk
Lee, Sangmin Lee and Myoung Mo,
Sung, Hanyanag Univ., Korea

MNC 2023
16P-1: Poster Session I (14:00-16:00, Nov. 16), Room P (Eminence Hall) (2F)
16P-1-99
Development of high purity ALD
AlN films using N2H4 andcomparison with different N
source processes

16P-1-100
Investigating the Impacts ofDamaged Layer Removal
Process on Initial Cycles of Si
Atomic Layer Etching

Chien-Wei Chen and Chan-Yuen
Chang, Natl. Applied Res Labs.,
TaiwanNamgun Kim 1,2, Whankyun Kim
1,2, Dongjun Shin 2, Jongkyu Kim 2,
Kukhan Yoon 2, Youngju Ko 1 andHeeyeop Chae 1, 1 Sungkyunkwan
Univ. and 2 Samsung Electronics,
Korea

16P-1-1-108L
Plasma-enhanced atomic layer
deposition of crystalline GaN thinfilms using a cyclopentadienylbased precursor

16P-1-109L
Impact of ALD-ZrO2 nucleation
layers on leakage current
properties and dielectric constantof ferroelectric HfxZr1−xO2 thinfilms

Fumikazu Mizutani and Nobutaka
Takahashi, Kojundo Chemical Lab.,Japan

Room A (Eminence Hall) (2F)
+On-line
16A-4: Nanoimprint, Hybrid-NIL

16P-1-101
Improved Air Stability of Lithium
Metal through Pretreatment andAtomic Layer Deposition
Sangmin Lee, Hyeonseok Ji, Jaehyuk
Lee, Chaerim Kim and Myoung Mo
Sung, Hanyang Univ., Korea

16P-1-102
Structural and ferroelectric
properties of HfxZr1-xO2 thin films
with TiN top and bottom
electrodes
Wei-Che Weng 1, Jim-Long Her 1 andTung-Ming Pan 1,2, 1 Chang Gung
Univ. and 2 Chang Gung Memorial
Hospital, Taiwan

Takashi Onaya 1,2, Toshihide
Nabatame 2, Kazuhito Tsukagoshi 2,
and Koji Kita 1, 1 Univ. of Tokyo and2 NIMS, Japan

Room B (Rose Room) (2F)

Room C (Crown Hall) (2F)

Room D (Clover Room) (2F)

16B-4: Symp. D. Lipid Membrane

16C-4: Ferroelectrics (15:30-17:00)

16D-4: Nano-devices II (15:30-(16:00-17:40)
Chairs:Jun Taniguchi (Tokyo Univ. of Sci.)
Junpei Sakurai (Nagoya Univ.)

Micro and Nanotechnology II(15:00-16:30)
Chairs:Kazuaki Furukawa (Meisei Univ.)
Atsushi Miura (Hokkaido Univ.)

Chairs:Jun Kano (Okayama Univ.)
Shinya Tsukada (Shimane Univ.)

16:50)
Chairs:Sanguan Anantathanasarn (Furukawa
FITEL)
Shinjiro Hara (Hokkaido Univ.)

16A-4-1 16:00
Practical Applications of a Morpho
Butterfly-Inspired Optical Diffuser
Fabricated by Large-Area
Nanoimprint Lithography

16B-4-1 15:00
Functional measurement of
membrane proteins that utilizes
microwells sealed with lipid
bilayers in the presence of ionicliquid (Invited)

16C-4-1 15:30
Atomic-Layer Processing of
Ferroelectric HfO2 Thin Films for
Future Memory Applications(Invited)

16D-4-1 15:30
Delaying and Multiplying Analog
Input Signals for Higher
Performance of In-Materio
Reservoir Computing

Shinji Migita, AIST, Japan

Takuya Kawabata, Yuki Usami and
Hirofumi Tanaka, Kyushu Inst. ofTechnol., Japan

16C-4-2 16:00
Raman Spectroscopy Study on
the Relationship between B-Site
Arrangement and RelaxorAntiferroelectric Behavior in
Pb(In1/2Nb1/2)O3

16D-4-2 15:50
Condition to overestimate DIBL
parameter in cryogenic operationof MOSFETs

Kazuma Yamashita 1, Takuma Hattori
1,2, Yuji Kuwahara 1,2 and Akira Saito
1,2, 1 Osaka Univ. and 2 RIKEN
SPring-8, Japan

Yoshiaki Kashimura 1, Kazuaki
Furukawa 2 and Masumi Yamaguchi
1, 1 NTT and 2 Meisei Univ., Japan

16A-4-2 16:20
Accuracy verification using
simulation of miniaturized moirealignment marks for nanoimprint
lithography

16B-4-2 15:30
New tools for the functional
analysis of membrane proteinsbased on lipid bilayer systems(Invited)

Satoshi Mitsugi, Takashi Sato andSachiko Kobayashi, Kioxia, Japan

Ayumi Hirano-Iwata, Tohoku Univ.,
Japan

16A-4-3 16:40
Fabrication of 70 nm-Half-PitchCu Damascene Interconnects
based on Nanoimprint
Lithography Compared with
193nm-ArF Immersion
Lithography for Back End of Line
(BEOL) Applications

16B-4-3 16:00
Nanopore Sensors Using
Probe-Type Lipid Bilayer
Systems (Invited)

16C-4-3 16:20
Demonstration of ferroelectricity in
non-substituted AlN thin films
fabricated by sputtering method

Kan Shoji, Nagaoka Univ. ofTechnology, Japan

Kota Hasegawa 1,2, Takao Shimizu
2,3, Takeo Ohsawa 2, Isao Sakaguchi
1,2 and Naoki Ohashi 1,2,4, 1 Kyushu
Univ., 2 NIMS, 3 JST-PRESTO and 4
Tokyo Inst. of Technol., Japan

Kenta Suzuki 1, Sung-Won Youn 1,
Tetsuya Ueda 1, Hiroshi Hiroshima 1,
Yoshihiro Hayashi 1, Masaki Ishida 2,
Tomomi Funayoshi 2, Hiromi Hiura 2,
Noriyasu Hasegawa 2 and Kiyohito
Yamamoto 2, 1 AIST and 2 Canon,Japan

Shinya Tsukada 1, Yasuhiro Fujii 2,
Hidehiro Ohwa 3, Kenji Ohwada 4, 1
Shimane Univ., 2 Ritsumeikan Univ., 3
Gifu Univ. and 4 QST, Japan

16A-4-4 17:00
Nanoimprint Performance
Improvements for High Volume
Semiconductor Device
Manufacturing

16C-4-4 16:40
Crystal structure and electricalproperties of (Al, Ga, Sc)N ternary
thin films prepared by RF
sputtering

Hiroyuki Matsuda, Naoki Maruyama,
Mitsuru Hiura, Yoshio Suzaki, Atsushi
Kimura, Kiyohito Yamamoto, Takahiro
Matsumoto, Kenji Yamamoto andYukio Takabayashi, Canon, Japan

Kazuki Okamoto 1, Reika Ota 1,
Shinnosuke Yasuoka 1, Yoshihiro
Ueoka 2, Yoshiro Kususe 2, Masami
Mesuda 2 and Hiroshi Funakubo 1, 1
Tokyo Inst. of Technol. and 2 Tosoh,Japan- 10 -

Yuika Kobayashi 1,2, Hidehiro Asai 2,
Shota Iizuka 2, Junichi Hattori 2,
Tsutomu Ikegami 2, Koichi Fukuda 2,
Tetsuro Nikuni 1 and Takahiro Mori 2, 1
Tokyo Univ. of Sci. and 2 AIST, Japan

16D-4-3 16:10
High Performance of Bilayer
StackedAntiferroelectric/Ferroelectric
HfxZr1−xO2 One-Transistor
MemoryChieh Lo, Chung-Kuang Chen, ShuChieh Chang, Kun-Tao Lin and TienSheng Chao, Natl. Yang Ming Chiao
Tung Univ., Taiwan

16D-4-4 16:30
Sensitivity to an embedded
nanostructure in a micrometerchannel-length Si MOSFET
Takuma Mitsuya, Renxiang Lyu andSeiya Kasai, Hokkaido Univ., Japan

Room A (Eminence Hall) (2F)
+On-line
16A-4-5 17:20
Effect of thickness of metal film
and resin structures for terahertz
absorptance and thermal
response

MNC 2023
Room B (Rose Room) (2F)

Room C (Crown Hall) (2F)
16C-4: 17:00-17:10
Author's Interview

Genki Kuwano, Kazuma Kurihara, andRyohei Hokari, AIST, Japan

16A-4: 17:40-17:50
Author's Interview
Room P1 (Plaza Hall) (B1F)
18:20-20:20 Banquet
Banquet Chair: Koji Asakawa (Kioxia)
Opening Remark: Seiya Kasai (Hokkaido Univ.)
Closing Remark: Toshiyuki Tsuchiya (Kyoto Univ.)- 11 -

Room D (Clover Room) (2F)
16D-4: 16:50-17:00
Author's Interview

MNC 2023

Friday, November 17, 2023
Room A (Eminence Hall) (2F)
+On-line
17A-1: Symp. A. Challenge to the

Room B (Rose Room) (2F)

Room C (Crown Hall) (2F)

Room D (Clover Room) (2F)

17B-1: Nano-devices III (9:00-

17C-1: Nanomaterials and

17D-1: Microsystem Technology

physical limit for lithography anddevices: Are we ready to boost thescaling roadmap ? V (9:00-10:30)
Chairs:Makoto Sakakibara (Hitachi)
Hiroshi Yamashita (Nuflare Technol.)

10:30)
Chairs:Nobuhiko Ozaki (Wakayama Univ.)
Shigeo Asahi (Kobe Univ.)

nanostructures II (9:00-10:30)
Chairs:Takashi Tsuchiya (NIMS)
Takao Shimizu (NIMS)

and MEMS I (9:00-10:50)
Chairs:Yoshihiro Hasegawa (Hiroshima City
Univ.)
Daisuke Yamane (Ritsumeikan Univ.)

17A-1-1 9:00
Dry Resist Metrology for High-NA
EUVL (Invited)

17B-1-1 9:00
Advanced process technologies
for monolithically integrated
tunable lasers (Invited)

17C-1-1 9:00
Hydroflux Process: a lowtemperature synthesis process to
obtain highly crystalline layeredtransition metal oxides (Invited)

17D-1-1 9:00
Characteristics and applications ofan organic piezoelectric material
PLLA for sensors (Invited)

Gian Francesco Lorusso 1, Dieter Van
Den Heuvel 1, Mohamed Zidan 1,
Alain Moussa 1, Christophe Beral 1,
Anne-Laure Charley 1, Danilo De
Simone 1, Anuja De Silva 2, Elisseos
Verveniotis 2, Ali Haider 2, Tsuyoshi
Kondo 3, Hiroyuki Shindo 3, Yasushi
Ebizuka 3, Miki Isawa 3, 1 imec, 2 Lam
Res. BVBA, Belgium and 3 Hitachi
High-Tech, Japan

17A-1-2 9:30
High repeatability and low
shrinkage solution using CD-SEM
for EUV resist (Invited)
Masaki Sugie, Toshimasa Kameda
and Shunsuke Mizutani, Hitachi HighTech, Japan

Tatsuro Kurobe, Furukawa Electric,Japan

17B-1-2 9:30
Fabrication of the QD nanopillar
photon emitter and PL spectral
tuning by piezoelectric external
force
Satoru Odashima, Kosei Tabata andReina Kaji, Hokkaido Univ., Japan

17B-1-3 9:50
Fabrication of an IR-emitter to
excite intramolecular vibrationsof water

Yoshitaka Tanada 1, Satoru
Odashima 1, Tsuyoshi Totani 1,
Kazumichi Kobayashi 1 and Yoshio
Kondo 2, 1 Hokkaido Univ. and 2
NGK INSULATORS, Japan

Masaki Matsui, Hokkaido Univ., Japan

Takashi Kasai and Mitsunobu Yoshida,
Mitsui Chemicals, Japan

17C-1-2 9:30 Withdrawn
Hierarchically Porous MetalOrganic Frameworks for Efficient
Solar Driven CO2 Hydrogenation

17D-1-2 9:30
Liquid-vapor phase change softcomposite actuator integrated withlaser induced graphene heater

W. Yuan, H.-J. Lv and Q.-G. Zhai,
Shaanxi Normal Univ., China

Shun-Wei Chiu 1, Cheng-Chun Huang
2, Ching-Yuan Su 2 and Yao-Chuan
Tsai 1, 1 Natl. Chung Hsing Univ. and
2 Natl. Central Univ. Taiwan

17C-1-3 9:50
High Proton Conduction of a-Axis
Oriented CeO2-δ Thin Film on(200) YSZ Substrate

17D-1-3 9:50
Study and fabrication of flexible
triboelectric tactile sensor basedon laser induced graphene

Minami Tani, Go Notake, Takemasa
Kadowaki and Tohru Higuchi, Tokyo
Univ. of Sci., Japan

Ching Hsieh 1, Cheng-Chun Huang 2,
Ching-Yuan Su 2 and Yao-Chuan Tsai
1, 1 Natl. Chung Hsing Univ. and 2
Natl. Central Univ., Taiwan

17B-1-4 10:10
Thermoelectric performance
improvement of Peltier threadusing carbon-nanotubecomposite threads

17C-1-4 10:10
High-performance
YbTixOy/PbZr0.53Ti0.47O3 stacked
gate dielectrics for InGaZnO thinfilm transistors

17D-1-4 10:10
Laser Processingfor Time
Response Enhancementof
Flexible MEMS Thermal Sensors

Masato Yamabe 1, Koya Arai 2 andTakahide Oya 1, 1 Yokohama Natl.
Univ. and 2 Mitsubishi Materials,
Japan

Tung-Ming Pan 1,2, Hung-Ming Hsiung
1, Hung-Chun Wang 1 and Jim-Long
Her 1, 1 Chang Gung Univ. and 2
Chang Gung Memorial Hospital, Taiwan

17B-1: 10:30-10:40
Author's Interview

17C-1: 10:30-10:40
Author's Interview

M.S. Al Farisi, S. Toyota, Y. Hasegawa
and M. Shikida, Hiroshima City Univ.,
Japan

17D-1-5 10:30
Embedding Airflow Sensing
Function in Balloon Catheter for
Respiration Measurement in
Bronchus Region Inside Lung
S.H. Lee 1, M.S. Al Farisi 1, Y.
Hasegawa 1, M. Matsushima 2, T.
Kawabe 2 and M. Shikida 1, 1
Hiroshima City Univ. and 2 Nagoya
Univ., Japan

17D-1: 10:50-11:00
Author's Interview

17A-2: Symp. A. Challenge to the

Lobby (2F)
Coffee Break
17B-2: Nano-devices IV (11:0017C-2: Neuromorphic computing

17D-2: Microsystem Technology

physical limit for lithography anddevices: Are we ready to boost thescaling roadmap? VI (11:00-12:00)
Chairs:Keiichiro Hitomi (Hitachi)
Hiroshi Yamashita (Nuflare Technol.)

12:00)
Chairs:Takahisa Tanaka (Keio Univ.)
Munetoshi Seki (Univ. of Tokyo)

devices and materials (11:00-12:20)
Chairs:Takashi Tsuchiya (NIMS)
Kazuto Hatakeyama (Kumamoto
Univ.)and MEMS II (11:20-12:40)
Chairs:Sumito Nagasawa (Shibaura Inst. ofTechnol.)Muhammad Salman Al Farisi(Hiroshima City Univ.)

17A-2-1 11:00
Wafer-scale characterization for
2D material layers (Invited)

17B-2-1 11:00
Developing Effective Si
Nanoresonator Devices for
Ultrasensitive Gas Sensing

17C-2-1 11:00
Ion-gating Reservoir Utilizing
Magnetization Vector
Manipulation

17D-2-1 11:20
Demonstration of an acoustic
resonator exceeding 40 GHz

Wei Yu, Amit Banerjee, Jun Hirotani
and Toshiyuki Tsuchiya, Kyoto Univ.,Japan

Wataru Namiki 1, Daiki Nishioka 1,2,
Takashi Tsuchiya 1, Tohru Higuchi 2
and Kazuya Terabe 1, 1 NIMS and 2
Tokyo Univ. of Sci., Japan

A. Moussa 1, J. Bogdanowicz 1, B.
Groven 1, P. Morin 1, M. Beggiato 1, M.
Saib 1, G. Santoro 2, Y. Abramovitz 3,
K. Houchens 3, S. Ben Nissim 3, N.
Meir 4, J. Hung 4, A. Urbanowicz 4, R.
Koret 4, I. Turovets 4, B. Lee 5, W.T.
Lee 5, G. F. Lorusso 1 and A.-L. Charley
1, 1 imec, 2 Applied Materials, Belgium,
3 Applied Materials, 4 Nova Measuring
Instruments, Israel and 5 Nova
Measuring Instruments, USA- 12 -

Megumi Kurosu, Daiki Hatanaka,
Hiroshi Yamaguchi, Yoshitaka
Taniyasu and Hajime Okamoto, NTT,Japan

Room A (Eminence Hall) (2F)
+On-line
17A-2-2 11:30
Multi-beam mask writer MBM3000 for next generation EUV
mask production (Invited)
Issei Aibara, H. Matsumoto, J. Yasuda,
N. Nakayamada, Y. Kojima, and H.
Yamashita NuFlare Technology, Japan

MNC 2023
Room B (Rose Room) (2F)

Room C (Crown Hall) (2F)

Room D (Clover Room) (2F)

17B-2-2 11:20
Selective Functionalized Pt
Nanoparticles on WS2 by Atomic
Layer Deposition for Enhancing
Recovery and Responsivity of
NO2 Gas Sensor

17C-2-2 11:20
High-Performance Redox-based
Ion-Gating Reservoir using (104)oriented LiCoO2 film, Assisted by
Physical Masking

17D-2-2 11:40 Withdrawn
Micro Retroreflective Material
Fabricated by Three-Dimensional
Photolithography

17B-2-3 11:40
Optimal Design of Si-Nanosheet
Micro Thermoelectric Devices

17C-2-3 11:40
Lateral inhibition for edge
enhancement in signal
processing, emulated by a protonbased multi-channel device

Jisang Yoo 1, Dain Shin 1, Tatsuya
Nakazawa 2, Inkyu Sohn 1
Jaehyeok Kim 1, Seung-min Chung
1 and Hyungjun Kim 1, 1 Yonsei
Univ., Korea and 2 TANAKA
Kikinzoku Kogyo, Japan

Yuma Miyake, Md Mehdee Hasan
Mahfuz and Takanobu Watanabe,
Waseda Univ., Japan

17B-2: 12:00-12:10
Author's Interview

K. Shibata 1,2, D. Nishioka 1,2, W.
Namiki 1, T. Wada 1,2, T. Tsuchiya 1,2,
T. Higuchi 2 and K. Terabe 1, 1 NIMS
and 2 Tokyo Univ. of Sci., JapanS. Mallik, T. Tsuruoka, H.N. Mohanty
and K. Terabe, NIMS, Japan

17C-2-4 12:00
Electrical conductivity
measurement of {Mo154/152}-ringwith nano-gap electrodeSuguru Kimoto, Hiroshi Ohoyama andTakuya Matsumoto, Osaka Univ.,
Japan

17C-2: 12:20-12:30
Author's Interview
Lunch Time
17C-3: Nano surface, interface, andYufei Chen, Madoka Nagai, Hiromasa
Oku and Takaaki Suzuki, Gunma
Univ., Japan

17D-2-3 12:00
A Simulation Platform for SAEMEMS Vibration Energy
Harvesters using Hardware
Description Language on a Circuit
Simulator

K. Tokuno 1, S. Kinoshita 1, F. Sugitani
1, T. Sono 1, Y. Tanaka 2 and D.
Yamane 1, 1 Ritsumeikan Univ. and 2
Gunma Univ., Japan

17D-2-4 12:20
An electromechanical cantileveractuator with a dimpled tip used
for reconfigurable THz
metamaterials
Ying Huang, Taiyu Okatani, Naoki
Inomata and Yoshiaki Kanamori,Tohoku Univ., Japan

17D-2: 12:40-12:50
Author's Interview

17A-3: Electron and Ion Beam

17B-3: Symp. B: Material

Technologies (13:30-14:30)
Chairs:Keiichiro Hitomi (Hitachi)
Hiroshi Yamashita (Nuflare Technol.)Intelligence: Potential of inmaterio computing I (13:30-15:00)
Chairs:Takuya Matsumoto (Osaka Univ.)
Hirofumi Tanaka (Kyushu Inst. ofTechnol.)advanced microscopy I (13:3015:00)
Chairs:Takayuki Hoshino (Nagoya Univ.)
Osamu Kubo (Gifu Univ.)

Functional Surfaces (13:30-15:00)
Chairs:Yuzuru Shimazaki (Hitachi) Yoshihiko
Hirai (Osaka Metropolitan Univ.)

17A-3-1 13:30
Development of electron beamlithography technique for large
area nano structural color

17B-3-1 13:30
Neuromorphic Molecular
Networks (Invited)

17C-3-1 13:30
Optoelectronic physical reservoir
devices based on nanocomposite
films (Invited)

17D-3-1 13:30
Bio-Inspired Strategies forEnhancing Underwater Adhesion:
Lessons from Aquatic Organisms(Invited)Sung-Won Youn 1, Kenta Suzuki 1,
Hiroshi Hiroshima 1, Shunichi Toda 2
and Satoshi Nagai 2, 1 AIST and 2
Elionix, Japan

Takuya Matsumoto, Osaka Univ.,
Japan

Takashi Ikuno, Tokyo Univ. of Sci.,
Japan

17A-3-2 13:50
An innovative computational
method for accelerating the
calculation of parametric point
spread function in electron beamlithography

17B-3-2 14:00
TBC (Invited)

17A-3-3 14:10
Reactive Ion Beam Etching(RIBE) of Dielectric Multilayer
Diffraction Gratings for Scientific
Applications

17B-3-3 14:30
Materializing Cognition –Information processing in
cognitive matter (Invited)

17C-3-3 14:20
Hopping site generation in
PCBM thin films induced by Au
doping

Wilfred G. van der Wiel, Univ. ofTwente, The Netherlands and Univ.
of Münster, Germany

Dong Han, Tsuyoshi Nakajima,
Tomoki Misaka, Takashi Yamada,Hiroshi Ohoyama and Takuya
Matsumoto, Osaka Univ., Japan

James K. Gimzewski, UCLA, USA

Kouhei Hachiya 1, Yuuki Hiraoka 1,
Osamu Kubo 1,2, Hiroshi Tabata 1 andMitsuhiro Katayama 1, 1 Osaka Univ.
and 2 Gifu Univ., Japan

Chun-Hung Liu 1, Yen-Hua Tu 1,
Cheng-En Wu 1, Chia-Han Chou 1,
Ze-An Ding 2, Yun-Chin Li 1, Yu-Lin
Chung 1, Sheng-Kai Wong 1, Yu-Tang
Sun 1, Yu-Jun Zhong 1 and ShuenPing Wang 2, 1 Natl. Taipei Univ. and 2
Natl. Taitung Univ., Taiwan

Gregor Dornberg 1, Frank Frost 1,
Felix Koch 2, Ingo Steingötter 2,
Tilman Glaser 2, Johannes Görlitz 3
and Andreas R. Maier 4, 1 IOM, 2 Carl
Zeiss Jena, 3 Saarland Univ. and 4
DESY, Germany

17C-3-2 14:00
Photocurrents of methylated
germanane induced by various
wavelength lights

17C-3-4 14:40
Nonlinear electrical conductionof PEDOT/PSS using nanoelectrodes
Yuta Nishimura, Hiroshi Ohoyama
and Takuya Matsumoto, Osaka
Univ., Japan

17A-3: 14:30-14:40
Author's Interview

17C-3: 15:00-15:10
Author's Interview- 13 -

17D-3: Biomimetics, andTakayuki Kurokawa, Hokkaido Univ.,
Japan

17D-3-2 14:00
Nanoimprint lithography using
gas-permeable mold for
microneedles capable ofencapsulating pharmaceuticalingredients

Rio Yamagishi 1, Sayaka Miura 1,
Naoto Sugino 2, Yoshiyuki Yokoyama
3, Mano Ando 1, Yuna Hachikubo 1
and Satoshi Takei 1, 1 Toyama Pref.
Univ., 2 Sanko Gosei and 3 Toyama
Industrial Technol. Res. and Develop.
Center, Japan

17D-3-3 14:20
Fabrication of hollow microneedles
with jagged edges mimicking
mosquito by thermal nanoimprinting
method using soft moldJinya Sakamoto, Tosihiro Shiratori,
Masato Suzuki, Tomokazu Tskahashi
and Seiji Aoyagi, Kansai Univ., Japan

17D-3-4 14:40
Optical Condensation Raman
Spectroscopy of Organic
Compounds by Self-assembled
Plasmonic Nano-bowl Structures

Masatoshi Kanoda 1, Kota Hayashi 1,
Yumiko Takagi 1, Shuichi Toyouchi 1,
Mamoru Tamura 1,2, Shiho Tokonami
1 and Takuya Iida 1, 1 Osaka
Metropolitan Univ. and 2 Osaka Univ.,
Japan

17D-3: 15:00-15:10
Author's Interview

Room A (Eminence Hall) (2F)
+On-line
17A-4: Symp. A. Challenge to thephysical limit for lithography anddevices: Are we ready to boost thescaling roadmap?
Panel Disucussion (15:00-17:00)
Chairs:Tomoki Nagai (JSR)
Koji Asakawa (Kioxia)
Panelists
Takeo Watanabe, University of Hyogo
Christopher Kemper Ober, Cornell
University
Jara Garcia Santaclara, ASML
Ryan Ryoung-han Kim, imec
Alessandro Vaglio Pret, KLA

MNC 2023
Room B (Rose Room) (2F)

Room C (Crown Hall) (2F)

17B-4: Symp. B: Material

17C-4: Nano surface, interface, andIntelligence: Potential of inmaterio computing II (15:30-16:30)
Chairs:Takuya Matsumoto (Osaka Univ.)
Hirofumi Tanaka (Kyushu Inst. ofTechnol.)advanced microscopy II (15:3016:50)
Chairs:Osamu Kubo (Gifu Univ.)
Ryuzo Kawamura (Saitama Univ.)

17B-4-1 15:30
Towards new memristive
materials and devices (Invited)

17C-4-1 15:30
Double electron-electron
resonance between NV centersand free radicals

Gisya Abdi, Lulu Alluhaibi,
Ewelina Kowalewska,
Tomasz Mazur, Andrzej Sławek andKonrad Szaciłowski, AGH Universityof Sci. and Technol., Poland

Masato Tsugawa 1, Ken Sekiguchi 1,
Shuntaro Usui 1, Daiki Saito 1, Yuto
Miyake 1, Tokuyuki Teraji 2, Shinobu
Onoda 3, Takahiro Shinada 4, Manabu
Tanaka 5, Hiroshi Kawarada 1 andTakashi Tanii 1, 1 Waseda Univ., 2
NIMS, 3 Natl. Inst. for Quantum andRadiological Sci. and Technol., 4
Tohoku Univ. and 5 Tokyo Metropolitan
Univ., Japan

17B-4-2 16:00
Materials Intelligence: Recent
development of in-materio
reservoir devices for robot
application (Invited)

17C-4-2 15:50
Reactive etching and pressure
resistance evaluation of SiNx filmby O2-GCIB for electrontransmission window of liquid cell

Hirofumi Tanaka, Kyushu Inst. ofTechnol., Japan

Masaya Takeuchi 1, Satoru Suzuki 1,
Masaki Nakamura 1, Takashi Hata 2,
Yusuke Nishiuchi 2, Kaori Tada 2 andNoriaki Toyoda 1, 1 Univ. of Hyogo and
2 Natl. Inst. of Technol., Kochi College,Japan

17C-4-3 16:10
Label-free 3D-tracking of nano/micro-objects by RGB-pinholes
D. Kim 1, T. Matsuzaki 2, H.
Yoshikawa 2, and R. Kawamura 1, 1
Saitama Univ. and 2 Osaka Univ.,
Japan

17C-4-4 16:30
Improving thawing rates incryoprotectant-freecryopreservation using an impactinduced droplet releasing method
Hiroki Watanabe and Yoshitake
Akiyama, Shinshu Univ., Japan

17C-4: 16:50-17:00
Author's Interview- 14 -

Room D (Clover Room) (2F)

17P-1: Poster Session II (14:00-16:00, Nov. 17), Room P (Eminence Hall) (2F)MNC 2023

17P-1: Advanced Lithography and Patterning Chairs: Sachiko Kobayashi (Kioxia) and Tetsuo Harada (Univ. of Hyogo)

17P-1-1 Withdrawn
Sub-Resolution Assist Feature
Development Using Stochastic
Modeling
Lawrence S. Melvin III 1, Zachary A.
Levinson 1 and Ulrich Welling 2, 1
Synopsys, USA and 2 Synopsys,
Germany

17P-1-2Markerless Overlay with the
NanoFrazor – Advanced
nanolithography for novel device
fabrication

17P-1-3
The hole-patterned pellicle with adiameter of sub-220 nm as asolution to increase EUVtransmittance

17P-1-4
Investigation into Field Distortion
and Pattern-Width Distribution of
Parabolic Mirror Optics Prepared
for Stereophonic Lithography

Fei Yang, Nicholas Hendricks,
Andrea Ubezio, Myriam Käppeli,
Jonas Vergés, Jana Chaaban, andEmine Çağin, Heidelberg
Instruments Nano AG, Switzerland

Jungyeon Kim, Ha Neul Kim, Seong
Ju Wi, Young Woo Kang, Won Jin Kim
and Jinho Ahn, Hanyang Univ., Korea

Toshiyuki Horiuchi, Jun-ya Iwasaki andHiroshi Kobayashi, Tokyo Denki Univ.,
Japan

17P-1-68L
Irradiation-induced effects of
micropatterned Polyethylene filmby 1-MeV proton beam writing
Kunpisit Kosumsupamala, Nitipon
Puttaraksa, Hironori Seki and Hiroyuki
Nishikawa, Shibaura Inst. of Technol.,Japan
17P-1: Electron and Ion Beam Technologies Chair: Hiroshi Yamashita (Nuflare Technol.)

17P-1-5
A novel point-based MPC method
for enhancing patterning
performance in high-NA EUV ILTcurvilinear masks

17P-1-6
A surrounding-aware segment
method to enhance computing
performance in curvilinear mask
process correction

Chun-Hung Liu 1, Yu-Lin Chung 1,
Sheng-Kai Wong 1, Yu-Tang Sun 1,
Ze-An Ding 2, Yu-Jun Zhong 1 YenHua Tu 1, Cheng-En Wu 1, Chia-Han
Chou 1, Yun-Chin Li 1 and ShuenPing Wang 3, 1 Natl. Taipei Univ. and
2 Natl. Taitung Univ., Taiwan
17P-1: Patterning Materials Chair: Kazumasa Okamoto (Osaka Univ.)
Chun-Hung Liu 1 and Ze-An Ding 2, 1
Natl. Taipei Univ. and 2 Natl. Taitung
Univ., Taiwan

17P-1-7
Shear viscoelasticity
measurement of ionogel thin films
for printable electronics achievedby combining contact current
measurement and nanorheometry
Yongbum Park 1, Shintaro Itoh 1,2,
Yasuyiki Kusaka 3, Kenji Fukuzawa 1,
Naoki Azuma 1,4 and Hedong Zhang
1, 1 Nagoya Univ., 2 JST-PRESTO, 3
AIST and 4 JST-ACT-X, Japan

17P-1-69L
Metal Removal Performance of
Dry Chelating Resin from PGMEA

17P-1-8
A Novel Approach for
Chemically Amplified Resist
Synthesis Assisted by Deep
Learning

17P-1-9
Gas type optimization for dry
development of CF4-based
plasma on organic-inorganic
hybrid EUV photoresist

17P-1-10
Single-crystalline nanowires ofmolecular ferroelectric
semiconductors for self-powered
broadband photodetectors

Chen Tang 1, Toshiaki Tanaka 2,
Atsushi Sekiguchi 2, Yoshihiko Hirai
2, Masaaki Yasuda 2, 1 Osaka Pref.
Univ. and 2 Osaka Metropolitan
Univ., Japan

Jiwoo Jung, Ji-Hoo Seok, Hyeonseok
Ji, Jaehyuk Lee, In-Sung Park, MyungMo Sung and Jinho Ahn, Hanyang
Univ., Korea

Xinxia Qiu, Mingsheng Xu, Ran Liu
and Laigui Hu, Fudan Univ., China

17P-1-14
Shortwave-infrared emitter using
bi-layer InAs quantum dots for
integrated light source
applications towards moisturemeasurements

Noriko Hisano, Kaoru Nukui and
Yukinari Yamashita, Organo, Japan

17P-1-70L
Study on Resist Performance of
Inorganic-Organic Resist
Materials for EUV and EB
Lithography

17P-1-11
Study on Resistive Switching
Mechanism inMetal/Graphene/Sumanene/Graphene/N+ Si Nonvolatile Memory

17P-1-12
Demonstration of Resistive
switching memory devices using
Buckybowls Sumanene inserted
Bilayer Graphene

17P-1-13
Circularly polarized light detection
characteristics of spin photodiodebased on a dilute nitride GaNAs
spin filter

Ryoichi Kawai, Eito Ashihara, Ryosuke
Ishikawa and Yuichiro Mitani, Tokyo
City Univ., Japan

Eito Ashihara, Ryouichi Kawai,
Ryousuke Ishikawa and Yuichiro
Mitani, Tokyo City Univ., Japan

T. Hioki, K. Etou, S. Hiura, J.
Takayama, A. Subagyo, K. Sueoka
and A. Murayama, Hokkaido Univ.,
Japan

17P-1-15
Physical Reservoir Application of
Random Network of Gold
Nanoparticles Fabricated by MultiStep Immersion in Gold Colloidal
Solution

17P-1-16Fabrication of Mn3Sn/MgO/Fetunnel Junction down to submicron scale

17P-1-17
La concentration dependence of
CO2 sensitivity in solutionprocessed Ladoped In2O3 thin-film
transistors

Hiroki Yamamoto 1, Yuko Ito 2,
Kazumasa Okamoto 2 and Takahiro
Kozawa 2, 1 QST and 2 Osaka
Univ., Japan
17P-1: Nanodevices Chair: Nobuhiko Ozaki (Wakayama Univ.)

K. Kobayashi 1, Y. Hayashi 1, K.
Fujikura 1, M. Moriya 1, H. Shimada 1
and Y. Mizugaki 1, 1 Univ. of ElectroCommunications, Japan

M. Yunokizaki 1, R. Kondo 1, H.
Idzuchi 1, K. Inukai 2, S. Sakamoto
1, K. Tanaka 1, T. Higo 1,3, S. Miwa
1,3 and S. Nakatsuji 1,3,4, 1 Univ. ofTokyo, 2 JSR, 3 JST-CREST, Japanand 4 Johns Hopkins Univ., USA

Ryota Kobayashi, Ayumu Nodera andShinya Aikawa, Kogakuin Univ., Japan- 15 -

Koki Okuno, Tatsuki Yokota, Yuuki C.
Hodson and Nobuhiko Ozaki,
Wakayama Univ., Japan

17P-1-18
Structural control of GaAs/AlGaAs
core-shell nanowires with buried
entire structure, native oxidation,and strain-induced deformations
tuned by top-shell layer
Hidetoshi Hashimoto 1, Keisuke
Minehisa 1, Kaito Nakama 1, Kazuki
Nagashima 1, Takeshi Yanagida 2,
Fumitaro Ishikawa 1, 1 Hokkaido Univ.
and 2 Univ. of Tokyo, Japan

17P-1: Poster Session II (14:00-16:00, Nov. 17), Room P (Eminence Hall) (2F)
17P-1-19
Realizing UV-to-Visible
Responsive Photodetectors with(FeNiCoCu)Ox Multicomponent
Metal Oxide as Interfacial Layer

17P-1-20
Co-doping of hydrogen andboron in In2O3 toward highly
flexible and transparent
conducting oxide film

Kuan-Yi Kuo, Po-Hsuan Hsiao andChia-Yun Chen, Natl. Cheng Kung
Univ., Taiwan

Kanta Kibishi, Shinri Yamadera,
Tsubasa Kobayashi, Ichiro Takano
and Shinya Aikawa, Kogakuin Univ.,
Japan

17P-1-23
Study of increasing carbon
nanotube content to improve
thermoelectric power generation
Performance of carbon nanotube
composite paper

17P-1-24
Reduction of remaining
hysteresis in unannealed Bdoped In2O3 TFTs by O2 plasma

17P-1-25
1.2 kV SiC MOSFET with buriedoxide for improving gate charge
characteristics

Shinri Yamadera, Kanta Kibishi,
Ayumu Nodera and Shinya Aikawa,
Kogakuin Univ., Japan

Hyowon Yoon, Chaeyun Kim,
Yeongeun Park, Sangyeob Kim,
Jinhun Kim, Sumin Park and Ogyun
Seok, Kumoh Natl. Inst. of Technol.,Korea

17P-1-28
Development of "transpirationtype thermoelectric power
generating paper" based on
CNT composite papers andexamining its multi-sage
structure

17P-1-29
Investigation of performance
improvement of carbon nanotube
composite paper actuator by
improving viscosity of electrolyte

Yuki Shimamoto 1, Koya Arai 2 andTakahide Oya 1, 1 Yokohama Natl.
Univ. and 2 Mitsubishi Materials, Japan

17P-1-27
Improved performance of n-type
paper transistors using vacuum
impregnation
Kaito Adachihara and Takahide Oya,Yokohama Natl. Univ., Japan

17P-1-21
Effect of In2O3 Channel Thickness
in TFT Gas Sensor for CO2
Sensing Characteristics
Ayumu Nodera, Ryota Kobayashi,
Shinri Yamadera, Kanta Kibishi,
Tsubasa Kobayashi and Shinya
Aikawa, Kogakuin Univ., Japan

17P-1-22
Improvement of Memory
Operation through JunctionlessFerroelectric-Metal Field-EffectTransistors
Dong-Oh Kim 1,2, Changha Kim 1,
Yeonwoo Kim 1 and Woo Young Choi
1, 1 Seoul Natl. Univ. and 2 Samsung
Electronics, Korea

17P-1-26
Efficient couplings of solar lightwith silicon-based dielectric metaatoms featuring improved
photovoltaic performances
Shih-Hsiu Chen and Chia-Yun Chen,
Natl. Cheng Kung Univ., Taiwan

17P-1-30 Withdrawn
ZnO nanostructures for pH
sensing application

Ryodai Toyomasu and Takahide Oya,Yokohama Natl. Univ., Japan

Noah Jang, June Soo Kim, Maeum
Han, Seung Deok Kim, Jae Yong Lee,
Jiajie Wang, Hyunjun Kim, Da Ye Kim,
Yujin Nam, Jinkyung Kim and Seong
Ho Kong, Kyungpook Natl. Univ.,
Korea

17P-1-34
Hole-Proton Mixed Conduction of
BaCe0.4Pr0.4Y0.2O3-δ Thin Film with
Large Amount of Oxygen
Vacancies

17P-1-35
Local Thermal Conductivity
Properties of SiGe Nanowire
Observed by Laser Power Sweep
Raman Spectroscopy

Go Notake 1, Takemasa Kadowaki 1,
Daisuke Shiga 2, Hiroshi Kumigashira
2 and Tohru Higuchi 1, 1 Tokyo Univ. ofSci. and 2 Tohoku Univ., Japan

S. Sugawa, R. Yokogawa and A.
Ogura, Meiji Univ., Japan

Yudai Kamekawa 1, Koya Arai 2,
Takahide Oya 1, 1 Yokohama Natl.
Univ. and 2 Mitsubishi Materials,
Japan

17P-1-31
Development of hydrogen gas
sensor using carbon-nanotubecomposite paper

MNC 2023

17P-1-71L
HZO and MoS2-Based FE-FET
for Next-Generation Non-Volatile
MemoryShuntaro Kubo 1, Koya Arai 2 andTakahide Oya 1, 1 Yokohama Natl.
Univ. and 2 Mitsubishi Materials, JapanJee Hwan Lee 1,2, Yoon D. Kyung 2and Woo Jong Yu 2, 1
Sungkyunkwan Univ. and 2
Samsung Electronics, Korea
17P-1: Inorganic Nanomaterials Chair: Jun Kano (Okayama Univ.)

17P-1-32
Effective photon harvesting andenergy transfers of Al-catalyzed Si
nanowires and perovskite
nanocrystals for thin photovoltaic
cells

17P-1-33
Room-temperature electron spintransport to InAs quantum dots
using a dilute nitride
GaNAs/GaAs superlatticebarrierW. Jevasuwan and N. Fukata, NIMS,
Japan

Masayoshi Hosoe, Shino Sato,
Satoshi Hiura, Junichi Takayama
and Akihiro Murayama, Hokkaido
Univ., Japan

17P-1-36
Thermal annealing effect onparamagnetic point defects inamorphous silicon nitride films
formed by a low-pressurechemical vapor deposition
technique17P-1-37
Temperature dependence ofphotoluminescence propertiesof dilute nitride InGaAsN
quantum dots

17P-1-38
Surface Ion Conduction Below
500℃ of Ce0.8Gd0.2O2−δ Thin Filmwith Lange Amount of Oxygen
Vacancies

17P-1-39
Depth Profiling of SnO2:N Thin
Films Fabricated by RF
Magnetron Sputtering in N2
Atmosphere

Ayano Morita, Satoshi Hiura, Junichi
Takayama and Akihiro Murayama,
Hokkaido Univ., Japan

Mariko Yamada, Go Notake,Takemasa Kadowaki and Tohru
Higuchi, Tokyo Univ. of Sci., Japan

Takuma Kawaguchi, Tsubasa
Kobayashi and Shinya Aikawa,
Kogakuin Univ., Japan

17P-1-41
Evolution of Electron Densities
in CVD-grown MoS2 Monolayer

17P-1-42
One-Dimensional Assemblies ofMagnetic Iron-Oxide
Nanoparticles

17P-1-43
Magnetic properties of V2O3
nanoparticles pulverized by a ballmill

Takumi Shiojima, Junpei Sakurai,
Seiichi Hata and Chiemi Oka, Nagoya
Univ., Japan

Akihiro Fukawa, Takuto Nakazawa,
Chiehisa Takeoka, Josuke Tamura andKouichi Takase, Nihon Univ., Japan

Kiyoteru Kobayashi 1, Ryo Miyauchi 1,
Kenshi Kimoto 2 and Kunimitsu
Maejima 2, 1 Tokai Univ. and 2 ESCO,
Japan

17P-1-40
Tuning of a Diffused- to a SurfaceControlled Process in BatteryType Spinel Structures: An
Effective Way to EnhanceElectrochemical Properties inSupercapacitors

Heesuk Rho 1, Taegeon Lee 1,
Seung Won Lee 2 and Ji-Hoon Ahn
2, 1 Jeonbuk National Univ. and 2
Hanyang Univ., Korea

Johnbosco Yesuraj 1 and Kibum Kim
1,2, 1 Chungbuk National Univ., Korea
and 2 North Park Univ., USA- 16 -

17P-1: Poster Session II (14:00-16:00, Nov. 17), Room P (Eminence Hall) (2F)
17P-1-44 Withdrawn
Fabrication of anatase/rutile TiO2
composite nanorods withimproved photocatalytic activity

17P-1-45
A significant increase of currier
concentration in TiO2 by Smdoping

Chih-Chen Kuo and Yuan-Chang
Liang, Natl. Taiwan Ocean Univ.,
TaiwanAsuka Ishizawa 1, Mariko
Murayama 1,2, Hiroaki Aizawa 2,
Isshiki Hideo 3, Shinichiro Kaku 1,
Kazuto Miyano 1 and Xinwei Zhao 1,
1 Tokyo Univ. of Sci. and 2 Toyo
Univ. and 3 Univ. of ElectroCommunications., Japan

17P-1-48 Withdrawn
Exploring the enhanced photoelectrochemical properties of
Bi2O3 sheet/ WO3 thin film
composites

17P-1-49 Withdrawn
Synthesis and analysis of Mgdoped CoCr2O4 nanoparticles
for latent fingerprintdevelopment and analysis

Shang-Hao Chen and Yuan-Chang
Liang, Natl. Taiwan Ocean Univ.,
TaiwanMing-Kang Ho 1, Hsin-Hao Chiu 1,
Tsu-En Hsu 1, K. Manjunatha 1,
Sheng Yun Wu 1, B.R.Radha
Krushna 2 and H. Nagabhushana 2,
1 Natl. Dong Hwa Univ., Taiwan and2 Tumkur Univ., India

17P-1-52
Effects on optical and electricalproperties of MOCVD grown GaN
epilayers by gamma-ray
irradiation

17P-1-53
Comparison of lithographicallysynthesized metal nanodisks forphotoacoustic imaging
applications

17P-1-46
Introducing the vanadium oxide astransparent carrier-selective
contact for performance
improvement of organic/inorganic
hybrid solar cells

MNC 2023

17P-1-47
No heating deposition of CeO2HfO2 ferroelectric thick films by
sputtering method

Ta-Cheng Wei and Chia-Yun Chen,
National Cheng Kung Univ., Taiwan

Nachi Chaya 1, Koji Hirai 1,
Shinnosuke Yasuoka 1, Kazuki
Okamoto 1, Wakiko Yamaoka 2,
Yukari Inoue 2 and Hiroshi Funakubo
1, 1 Tokyo Inst. of Technol. and 2 TDK,Japan

17P-1-50
Modulating Luminescence
Properties of AlN:Eu Thin Films
through Control of Eu²⁺ and Eu³⁺
Ratios via Changing Annealing
Temperatures

17P-1-51
First-Principles Approach to
Quantitative Non-Integer
Dimension and Related Electronic
Properties in Multilayered
Nanomaterials

Kazuto Miyano 1, Yingda Qian 1,
Mariko Murayama 1,2, Asuka Ishizawa
1, Shinichiro Kaku 1, Keiichi
Yanagisawa 2, Sujun Guan 2, Ryota
Negishi 2, Tatsuro Hanajiri 2 andXinwei Zhao 1, 1 Tokyo Univ. of Sci., 2
Toyo Univ. Japan

Koichi Nakamura, Kyoto Univ. of
Advanced Sci., Japan

Jung-Sub Wi 1, Chulhong Kim 2 andHee-Kyung Na 3, 1 Hanbat Natl.
Univ., 2 POSTECH and 3 Korea
Res. Institute of Standards andSci.e, Korea
17P-1: Nano Surfaces, Interfaces, and Advanced Microscopy Chair:
Kyoung Su Lee 1, Dong-Seok Kim 2
and Eun Kyu Kim 1, 1 Hanyang Univ.
and 2 Korea Atomic Energy Res. Inst.,
Korea

17P-1-72L
Ion Transport on the Nanoporous
Membrane Patterned by Laser
Ablation
Myeonghyeon Cho, Seokhee Han,
Sunghui Park, Junsu Jang, Suwan
Choi and Bumjoo Kim, Kongju Natl.
Univ., Korea

17P-1-73L
Characterization of spiral bull’s
eye structure with spiral-shaped
Bragg reflector using scanningelectron microscopycathodoluminescence

17P-1-74L
Charge Ordering States on
Fe3O4(001) Surface: A
Comprehensive Comparison of
NC-AFM and STM Observations

17P-1-55
Characteristics of photonic
nanojets from cylindricalmicrostructures with different
heights produced by proton
beam writing

17P-1-56
A highly sensitive surface acoustic
wave (SAW) DUV sensor basedon In2O3/Ta2O5
nanoheterojunctions

Takao Okubo, Seiichiro Ishikawa,
Tatsunori Oiwa, Shin'ichi Warisawa
Hirotaka Hosoi, Subagyo Agus andand Reo Kometani, Univ. of Tokyo,
Kazuhisa Sueoka, Hokkaido Univ.,
Japan
Japan
17P-1: Microsystem Technology and MEMS Chair: Yoshihiro Hasegawa (Hiroshima City Univ.)

17P-1-54
Study and fabrication of rain
triboelectric nanogenerator basedon laser-induced grapheneinterdigital electrodeYun-Tung Huang 1, Cheng-Chun
Huang 2, Ching-Yuan Su 2 and YaoChuan Tsai 1, 1 Natl. Chung Hsing
Univ. and 2 Natl. Central Univ., Taiwan

17P-1-58
Terahertz stretchable
metamaterials for uniaxial strain
measurement based on dolmen
resonators
Taiyu Okatani, Munkh-Orgil
Dashdeleg, Naoki Inomata andYoshiaki Kanamori, Tohoku Univ.,
Japan

17P-1-62
Microfluidic-basted Sensor for
Detection of Time-dependent
Taste Using Lipid Polymer
Membrane
Yusuke Tahara 1, Yuto Suzuki 2 andRyo Takigawa 2, 1 Shinshu Univ. and2 Kyushu Univ., Japan

K. Tobe 1, H. Naoki 1, T. Sano 1, A.
Tsuji 2, K. Kosumsupamala 1, N.
Puttaraksa 1, H. Seki 1, T. Matsui 2,
and H. Nishikawa 1, 1 Shibaura Inst.
of Technol. and 2 Mie Univ., Japan

17P-1-59
Fabrication of engineered
microplastics in epoxy-based
polymer (SU-8) by means of thepenetration depth of protons
using proton beam writing
Nitipon Puttaraksa, Kunpisit
Kosumsupamala, Hironori Seki,
Sumito Nagasawa and Hiroyuki
Nishikawa, Shibaura Inst. ofTechnol., Japan

17P-1-63
Ge/ZnS based-bandpass filter
for non-dispersive infrared(NDIR) carbon dioxide sensor
Junyeop Lee 1,2, Seongpil Hwang
1,2, Narae Bang 1,2, Uksu Han 1,2,
Soobeen Baek 1,2, Yuntae Ha 1,2,
Su Ji Choi 1,2, Ji Hun Kim 1, Dong
Geon Jung 1 and Daewoong Jung
1, 1 KITECH and 2 Kyungpook Natl.
Univ., Korea

Hyunho Lee and Keekeun Kee, Ajou
Univ., Korea

17P-1-60
Fabrication and characterizationof static ''ON''- ''OFF'' state SSPP
devices integrating withmetamaterials
Minh Van Nguyen, Nobuaki Kikuchi,
Toshiyuki Kodama, Taiyu Okatani,
Naoki Inomata and Yoshiaki Kanamori,Tohoku Univ., Japan

17P-1-57
Organic Film Thickness
Dependence of Sensitivity Loss inOrganic Film Coated Piezoelectric
MEMS Wideband Acoustic
SensorHiroyuki Kuchiji 1,2 and Naoki
Masumoto 1 and Akiyoshi Baba 2, 1
Nissinbo Micro Devices and 2 Kyushu
Inst. of Technol., Japan

17P-1-61
Tracheal Intubation Tube with
Embedded Flow Sensor for
Respiration and Heartbeat
Monitoring During Canine Tartar
RemovalR. Nagayama 1, M.S. Al Farisi 1, Y.
Hasegawa 1, M. Matsushima 2, T.
Kawabe 2 and M. Shikida 1, 1
Hiroshima City Univ. and 2 Nagoya
Univ., Japan

17P-1-64
Surface activated bonding ofLithium Niobate wafers

17P-1-65
Effect of plasma treatment to bondstrength for hydrophilic bonding

Takeru Moritomo and Ryo Takigawa,
Kyushu Univ., JapanT. Oda 1,2 and R. Takigawa 1, 1
Kyushu Univ. and 2 Ayumi Industry,Japan- 17 -

17P-1: Poster Session II (14:00-16:00, Nov. 17), Room P (Eminence Hall) (2F)
17P-1-66
SiN photonic waveguide forquantum applications of Cs atoms
Ryohei Takei, AIST, Japan

17P-1-67
Room temperature bonding of
InP wafers using an activated Si
atomic layer
Zhang Gufei, Murakami Seigo and
Ryo Takigawa, Kyushu Univ., Japan

17P-1-75L
Enhanced Sensitivity of Modal
Interference-Based Strain
Sensing Using Micro Dry-Etched
Perfluorinated Polymer OpticalFibersT. Nakanishi 1, R. Nakashima 1, C.-T.
Lo 2, H. Lee 3, Y. Mizuno 4, and D.
Yamane 1, 1 Ritsumeikan Univ.,
Japan, 2 Natl. Tsing Hua Univ., Taiwan,
3 Shibaura Inst. of Technol. and 4
Yokohama Natl. Univ., Japan- 18 -

MNC 2023

17P-1-76L
Investigation of surface activationof Si wafer for room temperature
direct bonding
Seigo Murakami and Ryo Takigawa,
Kyushu Univ., Japan