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Scientific Program of SISS-20
28th Jun, 2018 (Thu.)
Opening Remarks: 10:00-10:10
Atom Probe Tomography: 10:10-11:40
O1-1. (10:10-10:50) -Plenary talkAdvances and Challenges in SIMS and Atomprobe Metrology for Next Generation
Semiconductors
Wilfried Vandervorst (IMEC, KU Leuven)O1-2. (10:50-11:20) -Invited talkAtom-Probe Tomography of Nanoscale-Structured Materials via Targeted
Preparation by Focused-Ion-Beam Techniques
Dieter Isheim (Northwestern University)
O1-3. (11:20-11:40)
Atom Probe Tomography Investigation of Silicon Self-diffusion in Isotopically
Modulated Nanopillars
Ryotaro Kiga (Keio University)
Lunch: 11:40-13:00
Organic: 13:00-14:20
O1-4. (13:00-13:30) -Invited talkAn Ion-storage Multi-Reflection Time-of-Flight Mass Spectrometer for High Sensitive
SIMS Study
Haiyang Li (Dalian Institute of Chemical Physics, Chinese Academy of Sciences)O1-5. (13:30-14:00) -Invited talkDepth Profiling and 3D Imaging Using the 3D OrbiSIMS - New Capabilities for theAnalysis of Organic Materials
Rasmus Havelund (National Physical Laboratory)
O1-6. (14:00-14:20)
Sparse Modelling and Principal Component Analysis Application to TOF-SIMS Dataof Three Polymers
Satoka Aoyagi (Seikei University)
Coffee break: 14:20-14:40

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Sponsored Session: 14:40-16:00
O1-7. (14:40-15:00)
Advances in Cameca Atom Probe Tomography
Robert Ulfig (Cameca Instruments, Inc.)
O1-8. (15:00-15:20)
TOF-SIMS with MSMS, a Useful and Effective Tool for the Industrial World
Takahiko Suzuki (ULVAC-PHI, Inc.)
O1-9. (15:20-15:40)
Features and Usefulness of FILMER (FIB-TOF-SIMS & Laser-SNMS)
Akio Takano (TOYAMA Co., Ltd.)
O1-10. (15:40-16:00)
Recent Developments in TOF-SIMS Instrumentation from IONTOF
Markus Terhorst (IONTOF GmbH)

Short Presentation: 16:00-16:45
P-1
ToF-SIMS Data Interpretation of Organic Samples Using Machine Learning
Wataru Ishikura (Seikei University)
P-2
Effects of Thermal Annealing on Structural and Magnetic Properties of Mn Ions
Implanted AlInN/GaN Films
Abdul Majid Sandhu (University of Gujrat)
P-3
Quantitative Evaluation of Inorganic Boundary Films Formed in Engine Oil by
TOF-SIMS Depth Profiling with Low Energy Cs Sputtering
Atsushi Murase (Toyota Central R&D Labs., Inc.)
P-4
Mass Separation of AuGe Alloy Using Rotating Electric Fields (Ⅱ)
Tokio Norikawa (Tokyo University of Science)
P-5
Investigation of Aliphatic Matrices for Bi Cluster TOF-SIMS
Rie Shishido (Tohoku University)
P-6
Sputtering Yields of Polymers Produced by Vacuum Electrospray Water Droplet Ion
Beams
Satoshi Ninomiya (University of Yamanashi)

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P-7
Matrix and Element Dependences of Useful Yield in Si and SiO2 Matrices Using
Laser-Ionization Sputtered Neutral Mass Spectrometry
Reiko Saito (Toshiba Memory Corporation)
P-8
Evaluation of Impurity Diffusion for Si Quantum Dot Multilayers
Reina Miyagawa (Nagoya Institute of Technology)
P-9
Segregation Behavior around CH3O Molecular Ion Implantation Related Extended
Defects for CMOS Image Sensors
Satoshi Shigematsu (SUMCO Corporation)
P-10
Secondary Ion Behavior of Residual Gas Components during TOF-SIMS Depth
Profiling with Low Sputtering Rate
Junichiro Sameshima (Toray Research Center, Inc.)
P-11
Development of a Novel Analysis Technique by TOF-SIMS for the Visualization of
Cell Structure with High Spatial Resolution
Takuro Hasegawa (Kogakuin University)
P-12
Dialysis Analysis of Aerosol using TOF-SIMS
Masaki Fujisawa (Kogakuin University)
P-13
Analysis of Cesium Distribution in Water-Containing Plant by TOF-SIMS
Yuta Miyashita (Kogakuin University)
P-14
Effect of Coimplanted Carbon on Boron Behavior in Silicon: SIMS and Atom ProbeStudy
Yasuo Shimizu (Tohoku University)
P-15
Quantitative Depth Profiling of Hydrogen in Metals by Cryogenic Secondary Ion
Mass Spectrometry
Leiliang Zheng (Toray Research Center, Inc.)
P-16
Improvement in the Detection Sensitivity of Secondary Ions by Na Absorption with
the Mist Deposition Method on a PEG Surface
Taiki Matsuda (Kyoto University)

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P-17
Protonation and ionization of 1,4-didodecylbenzene under Water Cluster
Bombardment
Kousuke Moritani (University of Hyogo)
P-18
High-Speed SIMS Imaging Using a High Brightness Cluster Ion Source
Shuhei Yamada (Kyoto University)
P-19
Degradation Analysis of OLEDs Model Samples by Ar-GCIB-TOF-SIMS and
TOF-SIMS with MS/MS System
Daichi Shirakura (Toray Research Center, Inc.)
P-20
Atom Probe Mass Analysis of Organic Material: Polyethylene Glycol
Masahiro Taniguchi (Kanazawa Institute of Technology)
P-21
Reaction Rates of Isomeric C2H5O+ and C3H7O+ Ions with Polyethylene Glycols andPolyethylene Glycols Ethers with Fourier Transformation/Ion Cyclotron Resonance
Mass Spectrometry (FT/ICRMS)
Mohamed GAKU (RealTECH Geophysics)
P-22
Bevel Depth Profiling by High-Spatial-Resolution Laser-SNMS
Takahiro Kashiwagi (TOYAMA Co., Ltd.)
Poster Session: 16:55-17:55
Reception: 17:55-19:30

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29th Jun, 2018 (Fri.)
Bio 1: 9:00-10:30
O2-1. (9:00-9:30) -Invited talkMitigation of Ion Suppression for Quantitative Imaging in Cluster Secondary Ion
Mass Spectrometry of Biological Systems
Joseph Ellis (University of Illinois)O2-2. (9:30-10:00) -Invited talkThe Cross Sectioning Method Protocols Using Focused Ion Beam
Ichiro Mihara (Kuraray CO., LTD.)
O2-3. (10:00-10:30) -Invited talkMicrometer Resolution Atmospheric Pressure Mass Spectrometric Imaging (AP-MSI)
System for Live Tissue Analysis
Jae Young Kim (Daegu Gyeongbuk Institute of Science & Technology)
Coffee break: 10:30-10:45
Mass Imaging: 10:45-11:45
O2-4. (10:45-11:15) -Invited talkImaging Mass Spectrometry Analysis of Photosynthetic Products in Plants
Miyuki Takeuchi (University of Tokyo)
O2-5. (11:15-11:45) -Invited talkDevelopment of Coordinate Analysis with FIB-STXM-NanoSIMS-TEM: Applications
to the Extraterrestrial Materials
Motoo Ito (Japan Agency for Marine-Earth Science and Technology)

Lunch: 11:45-13:05
Bio 2: 13:05-14:15
O2-6. (13:05-13:45) -Plenary talkAmbient Pressure SIMS Imaging with MeV Ions
Roger Webb (University of Surrey)
O2-7. (13:45-14:15) -Invited talkCorrelated ToF-SIMS and Confocal Microscopy Imaging Visualizes the Recognition
between Platinum-Damaged DNA and Proteins in Single Cells
Fuyi Wang (Institute of Chemistry, Chinese Academy of Sciences)

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Inorganic: 14:15-15:05
O2-8. (14:15-14:45) -Invited talkDynamic Secondary Ion Mass Spectrometry: Present Status, Problems andProspects
Yuji Kataoka (Fujitsu Laboratories Ltd.)
O2-9. (14:45-15:05)
Helium and Neon Isotope Analysis of Genesis DOS Sample with LIMAS
Kenichi Bajo (Hokkaido University)
Coffee break: 15:05-15:25
Instrumentation & Application : 15:25-16:55
O2-10. (15:25-15:55) -Invited talkDevelopment of Cryogenic SIMS Technique for Biology and Cosmochemistry
Naoya Sakamoto (Hokkaido University)
O2-11. (15:55-16:15)
Dynamic SIMS for Characterization of Nuclear Materials
Paula Peres (CAMECA)
O2-12. (16:15-16:35)
Hybrid SIMS: A New Instrument for High Resolution Organic Imaging with Highest
Mass-Resolving Power and MS/MS
Derk Rading (IONTOF GmbH)
O2-13. (16:35-16:55)
Secondary Molecular Ion Emission of Polymers with Various Molecular Weights
under Large Cluster Ion Bombardment:
Enhancement with the Cationization Technique
Jiro Matsuo (Kyoto University)
Closing Remarks: 16:55-17:05