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Safety Data Sheet
1. Chemical product and company identification
Product name: TMAH-25

Company information
Name of manufacturer
Address
Name of section
Telephone number
Facsimile number
Mail address
Reference No： KANTO CHEMICAL CO., INC.
： 2-1, Nihonbashi, Muromachi 2-Chome, Chuo-Ku, Tokyo, 103-0022, Japan： Electronic materials division technical department： +81-3-6214-1080： +81-3-3241-1043： el-info@kanto.co.jp: GE00073 1.2

Recommended uses andrestrictions: Electronic chemicals

2. Hazards identification
GHS classification
Health hazards

Acute toxicity (oral)

Category 3

Acute toxicity (dermal)

Category 3

Skin corrosion/irritation

Category 1

Serious eye damage/eyeirritation

Category 1

Specific target organ toxicity(single exposure)

Category 1 (nervous system)

Specific target organ toxicity(repeated exposure)

Category 1 (nervous system)

Hazardpictograms

Signal word:

DangerHazard statements:

Toxic if swallowed or in contact with skin
Causes severe skin burns and eye damage
Causes damage to organs (nervous system)
Causes damage to organs (nervous system) through prolonged orrepeated exposure

Prevention:

Do not breathe mist, vapors.
Wash hands, forearms and face thoroughly after handling.
Do not eat, drink or smoke when using this product.
Wear protective gloves/protective clothing/eye protection/faceprotection.

Response:

IF SWALLOWED: Immediately call a POISON CENTER or doctor.
IF SWALLOWED: Rinse mouth. Do not induce vomiting.
IF ON SKIN: Wash with plenty of water.
IF ON SKIN (or hair): Take off immediately all contaminatedclothing. Rinse skin with water .

Precautionary statements

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IF INHALED: Remove person to fresh air and keep comfortable forbreathing.
IF IN EYES: Rinse cautiously with water for several minutes.
Remove contact lenses, if present and easy to do. Continue
rinsing.
IF exposed or concerned: Call a POISON CENTER or doctor.
Immediately call a POISON CENTER or doctor.
Call a POISON CENTER or doctor if you feel unwell.
Get medical advice/attention if you feel unwell.
Take off immediately all contaminated clothing and wash it before
reuse.
Storage:

Store locked up.

Disposal:

Dispose of contents/container to hazardous or special waste
collection point, in accordance with local, regional, national
and/or international regulation.

3. Composition/information on ingredients
Distinction of substance ormixture
Chemical name
Tetramethylammoniumhydroxide:

Substance

Concentration (%)

Formula25(CH3)4NOH

TSCA
ListedEC-No.
200-882-9

CAS RN
75-59-2

4. First aid measures
First aid measures
First-aid measures afterinhalation:

Remove the victim to fresh air, and make him blow his nose andgargle. If necessary, get medical treatment.

First-aid measures after skincontact:

Wash the affected areas under running water, get medicaltreatment as soon as possible.

First-aid measures after eye
contact:

Wash the affected areas under running water for at least 15
minutes. Get medical treatment.

First-aid measures afteringestion:

Rinse mouth with water. Give the victim one or two glasses ofwater or milk. Do not induce vomiting. Get medical treatment assoon as possible.

Personal Protection in FirstAid and Measures:

Rescuers should wear proper protective equipment like rubber
gloves, goggles.

Suitable extinguishing media:

This product is noncombustible.

Unsuitable extinguishing media

:

None

Firefighting instructions:

Move containers from fire area if it can be done without risk, if
not possible, apply water from a safe distance to cool andprotect surrounding area.

Personal protection (Emergencyresponse):

Wear breathing apparatus.

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6. Accidental release measures
Personal Precautions, Protective Equipment and Emergency Procedures
General measures:

Wear proper protective equipment and avoid contact with skin andinhalation of vapor. Conduct operations from upwind and evacuate
people downwind. Keep away personnel except for authorized ones
from spillage area by stretching ropes.

:

Attention should be given to avoid discharge of spilled productinto rivers and resulting environmental damage. When diluting
spill with large amounts of water, discharge of untreatedwastewater into the environment must be avoided.

Environmental precautions
Environmental precautions

Methods and Equipment for Containment and Cleaning up:Absorb spill with inert material （e.g, diatomaceous earth,sand） and flush spillage area with copious amounts of water.

Technical measures:

Wear proper protective equipment to avoid contact with skin orinhalation of vapor.

Precautions for safe handling:

Use with an enclosed system or a local exhaust ventilation. Use
in well-ventilated areas.

Storage conditions:

Store in a dark, cool place and tightly closed.

Material used inpackaging/containers:

Fluorine resin, Polyethylene, Polypropylene, etc.

For containment

7. Handling and storage
Handling

Storage

8. Exposure controls / Personal protection equipment
Appropriate engineering
controls
Protective equipment: Use with an enclosed system or a local exhaust ventilation.

Respiratory protection: If necessary, wear gas mask for organic solvents or airline
respirator.

Hand protection: Impervious protective gloves

Eye protection: Safety goggles

Skin and body protection: Protective clothing, protective boots

9. Physical and chemical properties
Physical state: Liquid

Color: Colorless.

Odor: Ammonia likepH: Strong alkalinity

Melting point: No data available

Freezing point: No data available

Boiling point: No data available

Flash point: Non flammable.

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Auto-ignition temperature: Non flammable.

Decomposition temperature: No data available

Flammability: Non flammable.

Vapor pressure: No data available

Relative density: No data available

Density: 1.01 (20℃)(Specific gravity)

Relative gas density: No data available

Solubility: Water: Miscible.

Partition coefficient noctanol/water (log Pow)

: No data available

Explosive limits (vol %): No data available

Viscosity, kinematic:: No data available

Particle characteristics: No data available

10. Stability and reactivity
Reactivity: May react with acids.

Chemical stability: Stable under normal conditions.

Possibility of hazardous
reactions: Stable under normal conditions of use.

Conditions to avoid: Light, heat.

Incompatible materials: Acids.

Hazardous decomposition
products: Carbon monoxide, nitrogen oxides.

11. Toxicological information
Acute toxicity (oral)
Acute toxicity (dermal)
Acute toxicity (inhalation)

Skin corrosion/irritation

Serious eye damage/irritation

Respiratory sensitization
Skin sensitization
Germ cell mutagenicity
Carcinogenicity
Reproductive toxicity: Toxic if swallowed
ATEmix=133mg/kg: Toxic in contact with skin
ATEmix=439mg/kg: No classification (gas)Classification not possible (vapor)
Classification not possible (dust, mist): Causes severe skin burns
Tetramethylammonium hydroxide : Strong alkaline with 10% aqueous
solution. Therefore, it was classified as category 1.
: Causes serious eye damage
Tetramethylammonium hydroxide : Strong alkaline with 10% aqueous
solution. Therefore, it was classified as category 1.
: Classification not possible: Classification not possible: Classification not possible: Classification not possible: Classification not possible

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STOT-single exposure

STOT-repeated exposure: Causes damage to organs (nervous system)
Tetramethylammonium hydroxide : As a result of an acute oral
toxicity test using rats, deaths at 34mg/kg or higher and signs ofa decrease in locomotor activity, hypothermia, incomplete eyelid
opening/eyelid closure, ataxic gait, clonic convulsions,salivation, and bradypnea at 23mg/kg or higher were observed. And
an LD50 value of 34 to 50 mg/kg bw was reported. And as a result ofan acute dermal toxicity test using rats, 100mg/kg, signs of adecrease in locomotor activity, irregular respiration, narrowpalpebral fissure, and tonic-clonic convulsions were observed. And
an LD50 value of 112mg/kg was reported. From signs such as ataxic
gait, clonic convulsions, and salivation at 23mg/kg in oral
exposure and a sign of tonic-clonic convulsions at 100mg/kg indermal exposure in the above reports, it was classified as category
1 (nervous system).
: Causes damage to organs (nervous system) through prolonged orrepeated exposure
Tetramethylammonium hydroxide : As a result of a repeated dose 28day oral toxicity test using rats, a sign of salivation at10mg/kg/day (converted to a 90-day equivalent: 3.1mg/kg/day) or
higher was observed. And a dose-dependent decrease in heart weightat 5mg/kg/day(converted to a 90-day equivalent: 1.55mg/kg/day) or
higher but histopathological changes were not observed. In
addition, as a result of a 28-day repeated dermal administration
toxicity test using rats, convulsions and tremors followed by signsof lethargy were shown. And deaths at 50mg/kg/day (converted to a90-day equivalent: 15.5mg/kg/day) or higher but no deaths and noclear toxic signs at 10mg/kg/day or lower were observed. Becausesalvation, convulsions, and tremors were observed within a range ofcategory 1 in Guidance values in both oral and dermal routes in theabove reports, it was classified as category 1 (nervous system).

Aspiration hazard: Classification not possible

12. Ecological information
Ecotoxicity
Aquatic acute
Aquatic chronic: Classification not possible: Classification not possible

Persistence and degradability
No additional information available
Bioaccumulative potential
No additional information available
Mobility in soil
No additional information available
Hazardous to the ozone layerOzone: Classification not possible

13. Disposal considerations
Ecological waste information: Dilute with copious water and adjust the pH to neutral, thenflush in drains. Or entrust approved waste disposal companies

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: In case of disposal of empty bottles, dispose bottles after
removing the content thoroughly.

Contaminated container andpackaging

14. Transport information
International Regulations
Transport by sea(IMDG)
UN-No. (IMDG)
Proper Shipping Name (IMDG)
Packing group (IMDG)
Transport hazard class(es)(IMDG)Air transport(IATA)
UN-No. (IATA)
Proper Shipping Name (IATA)
Packing group (IATA)
Transport hazard class(es)(IATA)

::
:
:

1835
TETRAMETHYLAMMONIUM HYDROXIDE SOLUTION
II
8:
::
:

1835
Tetramethylammonium hydroxide, solutionII
8:

Not applicable:

153

Marine pollutant
MFAG-No

15. Regulatory information
Regulatory information with regard to this substance in your country or region should be examined byyour own responsibility.

16. Other information
Data sources: Handbook of Dangerous Substances Springer-Verlag Tokyo（1991）.
Handbook of 17322 Chemical Products, The Chemical Daily Co.
（2022）.
NITE Chemical Risk Information Platform (NITE-CHRIP), National
Institute of Technology and Evaluation.

The information contained herein is based on several references and the present state of ourknowledge. However the SDS does not always cover all information about the product, handle theproduct carefully.The information is intended to ordinary usage, in case of particular handlings,
conduct appropriate safety measurements.The information herein is only provision of information, andit does not represent a guarantee the properties of the product.The Safety Data Sheet(SDS) isprepared based on JIS Z7253.