UHP Valves, Fittings & System Integration

TDF4 Series
High-Speed High-Cycle Life Valves

UHP Gas Series

The TDF4 series are high-purity gas-compatible diaphragm valves that combine
high-speed opening/closing durability, and Cv stability required for atomic layer
deposition (ALD) and atomic layer etch (ALE) processes.

Features
High-speed opening/closing, and high response stability
Realizes valve total response time 14ms and response stability ±2ms after 40 million cycles.
* Performance values according to our testing methods

Stable Cv value
Cv values are 100% factory-adjusted prior to shipment. With little variation in Cv values
during use, stable ﬂow rates can be obtained.
* Amount of variation with actuations within ±5%High cycle life
Durability test performance value of 60 million cycles ormore achieved as a result of our unique technology.
* Our test performance (test conditions): ﬂuid N2, charged pressure 0.25MPa(G),wetted area temperature 120°C

Options

Proximity sensor
The sensor's mounting
position may vary, it
depends on theactuator’s orientation
when tightened tospeciﬁcation.

Solenoid valveProximity sensor

Fixed with a dedicated bracket,enabling high-speed motion.
Shortens valve opening/closing time.

Transmits the valve's actuator openstate as an electrical signal.
Shipped after adjusting to optimum
performance during factory assembly.

Solenoid products manufactured by
MAC Valves, Inc., are recommended.

TypeWiring
lengthWiring

34C-ABA-GDFC-1GF

914 mmDuplex

Products manufactured by OMRONCorporation are recommended.

Operation Output
modeform

Sensor PN
E2E-S05S12-WC-B1

2M

NOPNP

E2E-S05S12-WC-B22MNCPNP

Solenoid valve

E2E-S05S12-WC-C1

2MNONPN

The orientation can be freelychanged without removing
the mounting screw.

E2E-S05S12-WC-C2

2M

NC

NPN

* In addition, special face-to-face dimensions and valve shapes, manifolds, mounting holes for cartridge
heaters, corrosion-resistant material bodies, etc., are available.
Contact our sales representative.

Speciﬁcations
Size

1/4”

Cv *10.21(120℃)

Surface Roughness≦ Rz 3.2 μm≤ Ra 0.5μm / 20μin

Room temperature ～120̊C

PolishMechanical polished20～120℃

Cleaning

14±2 msPackaging

0.051in3 (0.84 cm3) (C-seal, 2-port)

Wetted Area Volume

0.057in3 (0.94 cm3) (C-seal, 3-port)

Fluid Temperature *2
Atmospheric Temperature *2Response Speed *3≦1×10-9 sccs (≦ 1×10-10 Pa・m3/s)(at room temp)

Across the Seat
Leak Rates He Leak Rates

Electro polishedDegreasing+Single bagged package

Precision cleaning

Double bagged package
PFA
Cobalt alloy*1 The Cv value is calculated based on SEMASPEC-90120394B-STD and is min. value
from the tested valves heated at 120 ̊C.
*2 For proximity sensor and solenoid valve(Optional) installation, the ﬂuid temperatureand environment should not allow the solenoid valve to exceed 70̊C.
*3 Response speed: Motion time for the valve to open from a closed state after a signal
is sent to the solenoid valve.
NC: Time between the instant when the solenoid valve signal is turned ON and theinstant when the valve is fully opened
NO: Time between the instant when the solenoid valve signal is turned ON and theinstant when the valve is fully closed(Operating pressure: 0.48MPa, tube: length between the solenoid valve and the valve
76.2mm, inside diameter 2mm)

NC：65～87psig (0.45～0.6 MPa (G))

Actuation pressure≦ Rz 0.7 μm≤ Ra 0.13 μm / 5 μinDiaphragm≦1×10-9 sccs (≦ 1×10-10 Pa・m3/s)

SEP
SUS316LE(Double melt material)

Seat≦1×10-6 sccs (≦ 1×10-7 Pa・m3/s)(at max. temp)

Inboard He Leak Rates

EPSUS316L

Body Material

101psig (0.7 MPa(G))

Maximum Operating Pressure

STDGrade

NO：73～87psig (0.5～0.6 MPa (G))

Precautions

1)The valves are designed to be used under atmospheric pressure. If the valve’s actuatoris within a vacuum environment then the performance is not guaranteed.
2) For high temperature applications, please select appropriate material for the actuator’s
air-ﬁttings and tubes to assure proper performance.

TypeModelSize

Operation

Valve
Shape

Connection

Seat
Material

Open/CloseSensor

Option

Grade

TDF

4CSG

A

S

****

EP-316L

TDF: TDF-type
Diaphragm valve(High-speed
high-durability spec)

4：1/4"

C: Normally closed
O: Normally open

S: Straight
B: Branch

G: C-seal
Surface Mount
V: CVC male
VF: CVC female

A：PFANot shown:
Without sensor
S: With open/
close sensor

Serial no.:Sensor spec withsolenoid valve
Other special spec

STD-316L: Mechanical polished + SUS316L
EP-316L: Electro polished + SUS316L
SEP-316LE: Electro polished + Double melt material

Dimensions
Model

Unit: inch (mm)

TypeConnection

L

H

JA

B

C

DE

F

M

N

P

X

C-1.125
TDF4CS-GA Surface
Mount-

1.13 0.50 0.31 0.86 0.19 0.20
(28.6) (12.7) (7.75) (21.74) (4.75) (5.2)

3.37 0.26(85.7) (6.6)--0.63 0.71
(16) (18)

1.12(28.5)

M5 1.28(32.5)

CVC
2.241/4”male (57)-

3.83 0.43(97.2) (11)
TDS4CSCVC
2.78
VFA-S-＊＊＊＊ 1/4”female (70.6)

Z

0.06(1.55)

C-1.125
TDF4CBSurface
GA-S-＊＊＊＊Mount

TDF4CS-VA

Y---

0.98 0.98(25) (25)-

1.00 2-M5(25.4) DEPTH
0.20(5.0)---* The position of the solenoid valve can be turned in the desired direction.
* The sensor's mounting position will depend on the actuator's orientation when tightened to speciﬁcation.
* For N.O dimensions, contact our sales representative.

0.63 0.71(16) (18)https://kitz-sct.jp/english/■ Global Network
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Caution

Product speciﬁcations and performance values described in this catalog are based on our design calculations, in-house testing, product usage performance, and public standards and speciﬁcations,and are posted as a user’s guide under general usage conditions of the product. If the product is used outside of the described usage conditions or under special usage conditions, you should receive
our technical advice in advance or it will be necessary to ﬁrst conduct research and evaluation for performance veriﬁcation at the users’ own responsibility. Even if physical or personal damage
occurs without use of this procedure, we shall assume no responsibility. Although this catalog has been edited with the utmost care possible, contact us if there are any unclear points or if you comeacross any questionable matter. In addition, information described in this catalog will be revised without notice due to reasons that include correction of errors, supplementation/improvement ofinsuﬃcient content, improvement in product performance, design change, and discontinuation of production of products, etc., when deemed necessary. This invalidates the product catalog of theprevious version. The issue code is described on the back of your catalog. For product selection, contact us to conﬁrm whether your catalog is the latest version.
In addition, when exporting our products, exporters should obtain an export permit from the Ministry of Economy, Trade and Industry based on the provisions of the Export Trade Control Order of the“Foreign Exchange and Foreign Trade Act.” Contact us regarding any unclear points.

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