IPEX-800 SERIES
Industrial Excimer Lasers
Industrial excimer lasers for precision applica3ons in electronics, telecommunica3ons,semiconductor, medical devices and pulsed laser deposi3on.

•Now with exciPure™ technology for ul3mate gas life3mes and lowest cost of opera3on•

EasyClean™ automated op3cs seals toretain gas ﬁll and reduce down3me during op3cs maintenance•Op3onal High-Brightness op3cs for applica3ons requiring low beam divergence or extendedcoherence length•

High-stability op3cs mounts for ul3mate beam poin3ng accuracy•Simple integra3on into industrial processing systems

IPEX™-840 / 860 Series Industrial Excimer Lasers
IPEX-840/860 Series excimer lasers,

exciPure™ technology, introduced inHigh-Brightness (“Unstable Resonator”)

originally developed by Lumonics and2016, combines improved materials, a

op3cs are available for applica3ons thatnow oﬀered by LightMachinery, deliver

new dual-stage ﬁlter that removes bothdemand long-path low beam

the performance and reliability required

par3culate and gaseous contaminants

divergence (e.g. Lidar), extended

for a wide range of advanced, highand an improved stabiliza3on

coherence length (including

duty-cycle industrial manufacturing

algorithm. It represents the greatest

manufacturing of Fiber Bragg Gra3ngs)

applica3ons in the electronics,improvement in excimer gas life3me

and improved focusing.

semiconductor and medical device

and reduc3on in opera3ng costs in aindustries.

genera3on.

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IPEX-800 SERIESFeatures•

exciPure™ laser tube•

Keyed op/cs (1)•EasyClean™ automated op/cs seals•

StabiLase energy control with micro-injec/ons•Advanced op/c mounts•

So> preionisa/on (2)(1) U.S. Patent 5,237,583 (2) U.S. Patent 5,081,638

Beneﬁts•

Extended gas life/me, long replacement intervals, low opera/ng cost•

Simpliﬁes op/cal maintenance, retains gas ﬁll and passiva/on•

Delivers 200 microradian poin/ng stability•

No realignment required a>er cleaning or replacing op/cs•

Fast, precise energy stabiliza/on in internal, burst and external trigger modes•

Excellent pulse-to-pulse energy stability, beKer than 1.0% (1-σ, KrF)

Speciﬁca/ons
Series

ArF

KrF

XeCl

XeF

193248308

351

IPEX- 840

150400250

225

IPEX 860

200600500

300

IPEX- 840

230450300

275

IPEX 860

250

700

600

350

IPEX- 848

30805045

IPEX- 846

15402522

IPEX- 844

6.0

20

1211

IPEX- 842

3.0

10

6.0

5.5

IPEX- 868

2060

50

30

IPEX- 866

1030

2515

IPEX- 864

5.0

1810

9.0

IPEX- 862

2.5

9.0

5.0

4.5

IPEX- 848

200

200

200200

IPEX- 846

100

100100100

IPEX- 844

40505050

Wavelength (nm)Stabilised Pulse Energy (mJ) at maximum repe//on rate

Maximum Pulse Energy (mJ) at low repe//on rate

Stabilised Average Power (W)Maximum Repe//on Rate (pps)

IPEX- 842

20252525

IPEX- 868

100100100100

IPEX- 866

50505050

IPEX- 864

2530

2030

IPEX- 862

1215

1015

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IPEX-800 SERIESFWMH, nominal
Pulse Dura&on (ns)12-20

SeriesVxH, nominal

Beam Dimensions (mm)

IPEX- 840

12 x 26(V x H, nominal)

IPEX 860

12 x 28

Beam Divergence (mrad)

IPEX- 840

1x3

(V x H, nominal)IPEX 860

1x3Facili&esName

Descrip5on

Electrical
8X8 models

3-phase, 208 V or 400 V, 4.5 kW, 50 or 60 Hz

8X6 / 8X4 / 8X2 models

Single phase, 200- 240 V, 2.5kW / 1.5 kW / 1 kW, 50 or 60 Hz

Cooling Water
8X8 / 8X6 models

10 liters / minute, 5°- 20°C, 40- 60 psig

8X4 / 8X2 models

5 liters / minute, 5°- 20°C, 40- 60 psig

Laser Gases

Ar, Kr, or Xe rare gas, F2 or HCI halogen gas (diluted),
Ne and He buﬀer gases; or Pre-mixed gas
Compressed air or nitrogen (for op&cs gate valves & beam shuWer)

Weight
8X8 models

400 kg

8X6 / 8X4 / 8X2 models

380 kgDimensions in mm (inches)
864.0(34.0)

1746.3 (68.75)

LightMachinery
OUTPUT
APERTURE

95.3(3.75)
508.0(20.0)

247.7(9.59)

IPEX™
203.2 (8.0)
1141 (44.93)

402.4 (15.94)

134.1(5.29)For further technical and sales informa2on, please visit our website or contact:" LightMachinery Inc.
80 Colonnade Road# hyperﬁne@lightmachinery.com$ (613) 749-4895

ODawa, Ontario, Canada, K2E 7L2! www.lightmachinery.com

624(24.58)66.8(2.63)