Operating Manual
Incl. EU Declaration of Conformity

TrigonTM BAG552
Bayard-Alpert SingleGauge

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Table of Contents

INFICON

Table of Contents
1

General ............................................................................................................................................................................
1.1 Product Identification ...............................................................................................................................................
1.2 Validity .....................................................................................................................................................................
1.3 Intended Use ...........................................................................................................................................................
1.4 Functional Principle .................................................................................................................................................
1.5 Trademarks..............................................................................................................................................................

4
4
4
4
4
5

2

Safety ...............................................................................................................................................................................
2.1 Symbols Used..........................................................................................................................................................
2.2 Personnel Qualifications ..........................................................................................................................................
2.3 General Safety Instructions .....................................................................................................................................
2.4 Liability and Warranty ..............................................................................................................................................

5
5
5
5
6

3

Technical Data ................................................................................................................................................................

6

4

Installation....................................................................................................................................................................... 9
4.1 Vacuum Connection ................................................................................................................................................ 9
4.1.1 Removing and Installing the Electronics Unit .............................................................................................. 10
4.1.2 Preparing Bakeout of the Sensor ................................................................................................................ 11
4.1.3 Using the Optional Baffle ............................................................................................................................ 11
4.2 Power Connection ................................................................................................................................................... 13
4.2.1 Use With INFICON VGC50x Vacuum Gauge Controller............................................................................. 13
4.2.2 Use With Other Controllers ......................................................................................................................... 13
4.2.2.1 Making an Individual Sensor Cable.............................................................................................. 13
4.2.2.2 Making two EtherCAT Interface Cables ....................................................................................... 14
4.2.3 Using the Optional Power Supply (With RS232C Line) .............................................................................. 15

5

Operation......................................................................................................................................................................... 16
5.1 Putting the Gauge Into Operation ............................................................................................................................ 16
5.2 Degas ...................................................................................................................................................................... 16
5.3 Filament Status........................................................................................................................................................ 17
5.3.1 Filament Status Indicator ............................................................................................................................ 17
5.3.2 Filament Status Relay (Only without fieldbus) ............................................................................................ 17
5.3.3 Filament Status via Interface....................................................................................................................... 17
5.4 Filament Selection ................................................................................................................................................... 17
5.5 Trip Points / Setpoints.............................................................................................................................................. 17
5.6 Display ..................................................................................................................................................................... 19
5.6.1 Display Structure ......................................................................................................................................... 19
5.6.2 User Interface Basics .................................................................................................................................. 20
5.6.3 Starting the Degas Process ........................................................................................................................ 20
5.6.4 Switching on Emission ................................................................................................................................ 20
5.6.5 Setting Setpoint 1 or 2................................................................................................................................. 20
5.7 RS232C Interface .................................................................................................................................................... 21
5.7.1 Description of the Functions........................................................................................................................ 21
5.7.1.1 Output String (Transmit)............................................................................................................... 21
5.7.1.2 Input String (Receive) .................................................................................................................. 23
5.8 EtherCAT Interface .................................................................................................................................................. 23
5.8.1 Description of the Functions........................................................................................................................ 24
5.8.2 Operating Parameters ................................................................................................................................. 24
5.8.2.1 Operating Software ...................................................................................................................... 24
5.8.2.2 Explicit Device Address Setting ................................................................................................... 24
5.8.3 Status Indicators ......................................................................................................................................... 24

6

Deinstallation .................................................................................................................................................................. 24

7

Maintenance, Repair....................................................................................................................................................... 25
7.1 Maintenance ............................................................................................................................................................ 25
7.1.1 Cleaning the Gauge .................................................................................................................................... 25
7.2 What to Do in Case of Problems ............................................................................................................................. 26
7.3 Replacing the Sensor .............................................................................................................................................. 27

8

Options ............................................................................................................................................................................ 27

9

Spare Parts...................................................................................................................................................................... 27

10 Storage ............................................................................................................................................................................ 28
11 Returning the Product.................................................................................................................................................... 28
12 Disposal........................................................................................................................................................................... 28
Appendix ......................................................................................................................................................................... 29
Literature ......................................................................................................................................................................... 29
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Table of Contents

EU Declaration of Conformity........................................................................................................................................ 30
UKCA Declaration of Conformity .................................................................................................................................. 31
Symbol for cross-references within this document:
Symbol for references to literature list:

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1 | General

INFICON

1 General|

1.1 Product Identification|

In all communications with INFICON, please specify the information on the product nameplate.
For convenient reference copy that information into the space provided below.

INFICON AG, LI-9496 Balzers

Model:
PN:
SN:
V

W

1.2 Validity|

This document applies to products with the following part numbers:

The part number (PN) can be taken from the product nameplate.

1.3 Intended Use|

The TrigonTM BAG552 gauges have been designed for vacuum measurement of gases in thepressure range 5×10-10 ... 2x10-2 mbar.
They must not be used for measuring flammable or combustible gases in mixtures containing
oxidants (e.g. atmospheric oxygen) within the explosion range.
The gauges can be operated in connection with the INFICON Vacuum Gauge Controller
VGC501, VGC502, VGC503 or with other control devices.

1.4 Functional Principle|

The hot cathode measuring system uses an electrode system according to Bayard-Alpert which
is designed for a low X-ray limit.
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Safety | 2
The measuring principle of this measuring system is based on gas ionization. Electrons emitted
by the operating filament ionize a number of molecules proportional to the pressure in the measuring chamber.

1.5 Trademarks|

Trigon™
INFICON Holding AG
TripleGauge® INFICON Holding AG
EtherCAT®
EtherCAT® is a registered trademark and patented technology, licensed by
Beckhoff Automation GmbH, Germany.

2 Safety|

2.1 Symbols Used|

DANGER
Information on preventing any kind of physical injury.

WARNING
Information on preventing extensive equipment and environmental damage.

CautionInformation on correct handling or use. Disregard can lead to malfunctions or minor equipment
damage.
NoticeLabeling

2.2 Personnel Qualifications|

All work described in this document may only be carried out by persons who have suitable technical training and the necessary experience or who have been instructed by the end-user of the
product.

2.3 General Safety Instructions|·

Adhere to the applicable regulations and take the necessary precautions for the process media used.
Consider possible reactions with the product materials.

·

Adhere to the applicable regulations and take the necessary precautions for all work you aregoing to do and consider the safety instructions in this document.

Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.
Communicate the safety instructions to all other users.
·

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2.4 Liability and Warranty|

INFICON assumes no liability and the warranty becomes null and void if the end-user or third
parties·

disregard the information in this document·

use the product in a non-conforming manner·make any kind of interventions (modifications, alterations etc.) on the product· use the product with accessories not listed in the corresponding product documentation.
The end-user assumes the responsibility in conjunction with the process media used.
Gauge failures due to contamination are not covered by the warranty.

3 Technical Data|

Measuring range

Emission

Range (air, O2, CO, N2)

5×10-10 … 2×10-2 mbar, continuous

Accuracy
1×10-8 ... 2×10-2 mbar

±15% of reading

Repeatability

5% of reading, 10-8 … 2×10-2 mbar (after 10
min. stabilization)

Gas type dependence® 2 29Switching off threshold

3.2×10-2 mbar

Emission current
Sliding mode (default)p ≤ 8×10-7 mbarp > 1×10-3 mbar
Two-Point-Modep ≤ 7.2×10-6 mbar
3.0×10-5 mbar < p < 3.2×10-2 mbar
Emission current switching
Two-Point-Mode
25 µA ➔ 5 mA
5 mA ➔ 25 µA

Degas

5 mA
25 µA
5 mA
25 µA

7.2×10-6 mbar
3.0×10-5 mbar

Control input signal

0 V/+24 V (dc), active high(control via RS232 ® 2 21)

Degas emission current(p < 7.2×10-6 mbar)≈16 mA (Pdegas ≈4 W)

Control input signal

0 V/+24 V (dc), active high(control via RS232 ® 2 21)

Durationmax. 3 min, followed by automatic stop. A newdegas cycle can only be started after a waitingtime of 30 minutes.

In degas mode, BAG552-gauges keep supplying measurement values, however their tolerances may be higher than during normal operation.

Output signal

Display (BAG552)

Output signal (measuring signal)

0 … +10 V

Measuring range+0.57 … +8.176 V (5×10-10 … 2×10-2 mbar)

Relationship voltage-pressure

logarithmic, 1 V/decade

Error signal+0.1 V EEPROM error+0.3 V Hot cathode error

Minimum load impedance>10 kΩ

Display panel

OLED, 128×128 pixels

Dimensions

1.5” x 1.5”

Pressure units (pressure p)

mbar (default), Torr, Micron, Pa, hPa

Power supply

6

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Technical Data | 3

DANGER
The gauge may only be connected to power supplies, instruments or control devices that conform to the requirements of a grounded extra-low voltage (PELV). The connection to the gauge
has to be fused (INFICON controllers fulfill these requirements).
Supply voltage at the gauge
Ripple+24 V (dc) (+20 … +28 V (dc))1)≤2 VppCurrent consumption
Normal operation
Degas
Emission start (<200 ms)≤0.5 A≤0.9 A≤1.4 A

Power consumption
BAG552
BAG552 with EtherCAT

≤18 W
≤21 W

Fuse necessary

1.25 AT

Sensor cableconnection

For reasons of compatibility, the expression "sensor cable" is used for all BAG552
versions in this document, although the pressure reading of the gauges with fieldbus
interface (BAG552 with EtherCAT) is normally transmitted via the corresponding bus.
Receptacle

D-sub, 15-pin, male

Measuring cableshielded, number of conductors depending on
the functions used (max. 15 conductors plus
shielding)Cable length (supply voltage 24 V 1))
Analog and fieldbus operation

RS232C operation
Gauge identification

Switching functions

Switching functions
BAG552Adjustment range

Relay contact rating

RS232C interface≤35 m (0.25 mm2 conductor cross-section),≤50 m (0.34 mm2 conductor cross-section),≤100 m (1.0 mm2 conductor cross-section)≤30 m
42 kΩ resistor between Pin 10 and Pin 5

2 (setpoints 1 and 2)
5×10-10 … 2x10-2 mbar
Setpoints adjustable via diagnostic or EtherCAT interface with High Trip and Low Trip
functionality≤60 V (dc), 0.5 A (dc)

Data rate

9600 Baud

Data format

binary, 8 data bits, one stop bit, no parity bit,no handshake

Function and communication protocol of the RS232C interface ® 2 21

EtherCAT interface

Fieldbus name

EtherCAT

Standard applied, data format, communication ® & [3], ® & [4]protocolData rate

100 Mbps

Node address

explicit device identification

Physical layer

100Base-Tx (IEEE 802.3)

Ethernet connector
Cable

2×RJ45, 8-pin, socket, IN and OUT
shielded, 8-pin special Ethernet Patch cable(quality CAT5e or higher)≤100 mCable length

Diagnostic port

Plug

Jack connector 2.5 mm, 3-pin

Data rate

57600 Baud1)

Measured at sensor cable connector (consider the voltage drop as function of the sensor cable length).

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Data format

binary, 8 data bits, one stop bit, no parity bit,no handshake

For further information on the diagnostic port ® & [2].

Materials used, internal
volumeAmbiance

Materials exposed to vacuum:
Housing, supports, screens
Feedthroughs
Insulator
CathodeCathode holder
Pirani element
Sensor diaphragmSensor contacts

stainless steel
NiFe, nickel plated, Hastelloy
glass
iridium, yttrium oxide (Y2O3)
Ni
tungsten, copper
ceramic (Al2O3)
SnAg

Internal volume
DN 25 ISO‑KF
DN 40 CF‑R

≈24 cm3≈34 cm3

Pressure max. (absolute)

5 bar

Admissible temperatures
Storage
Operation
Bakeout–2 … +70 °C
0 ... +50 °C+150 °C (at vacuum connection, without electronics unit and calibration print, horizontally
mounted)Relative humidity(year's mean / during 60 days)≤65% (no condensation) / ≤85% (no condensation)Use

indoors only altitude up to 2000 m above sea
level

Mounting orientation

any

Pollution degree

2

Degree of protection

IP40

4-40UNC 2B

Dimensions [mm]4-40UNC 2B

60

60

178

67

56

51

173

67

33
DN 25 ISO-KF

DN 40 CF-R

33

Weight8

300 … 700 g

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Installation | 4

4 Installation|

4.1 Vacuum Connection|

DANGER
Overpressure in the vacuum system >1 bar
Injury caused by released parts and harm caused by escaping process gases can result if
clamps are opened while the vacuum system is pressurized.
· Do not open any clamps while the vacuum system is pressurized. Use the type of clamps
which are suited to overpressure.

DANGER
Overpressure in the vacuum system >2.5 bar
KF flange connections with elastomer seals (e.g. O-rings) cannot withstand such pressures.
Process media can thus leak and possibly damage your health.
· Use O-rings provided with an outer centering ring.

DANGER
Protective groundThe gauge must be electrically connected to the grounded vacuum chamber. This connection
must conform to the requirements of a protective connection according to EN 61010:· CF and VCR connections fulfill this requirement.
· For gauges with a KF vacuum connection, use a conductive metallic clamping ring.

DANGER
Leaking process media
High-intensity mechanical, chemical or thermal impacts can cause leaks in the measuring sensor. Process media can thus leak and possibly cause hazards, if overpressure is in the vacuum
system.
· Avoid high-intensity mechanical, chemical or thermal impacts and overpressure in the vacuum
system.
· Take appropriate measures (e.g. shut off gas supply, extraction, leak test) to avoid hazards ordamage due to leaking process media.

CautionVacuum component
Dirt and damages impair the function of the vacuum component.
· When handling vacuum components, take appropriate measures to ensure cleanliness andprevent damages.

CautionDirt sensitive area
Touching the product or parts thereof with bare hands increases the desorption rate.
· Always wear clean, lint-free gloves and use clean tools when working in this area.

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Mount the gauge so that no vibrations occur. Vibrations at the gauge cause a deviation of the measured values.
The gauge may be mounted in any orientation. To keep condensates and particles
from getting into the measuring chamber preferably choose a horizontal to upright position.
The gauge is supplied with a built-in grid. For potentially contaminating applications
and to protect the electrodes against light and fast charged particles, installation of theoptional baffle is recommended.
The sensor can be baked at up to 80 °C (at vacuum connection, horizontally
mounted). At temperatures exceeding 50 °C, the electronics unit has to be removed.
INFICON recommends to install the gauge without applying vacuum grease.
Remove the protective lid and connect the product to the vacuum system.

Seal withcentering ringor

Seal with centering ringand baffle (Option)

Keep the protective lid.

4.1.1 Removing and Installing the Electronics Unit|

Required tools/material

Allen key, AF 2.5

Removing theelectronics unit

1 Unscrew the hexagon socket set screw (1) on the side of the electronics unit (2).

12

2 Remove the electronics unit without twisting it.

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Installation | 4

Installing theelectronics unit

3 Place the electronics unit (2) on the sensor (3) (be careful to correctly align the pins andnotch (4)).

4

2

3

4 Slide the electronics unit in to the mechanical stop and lock it with the hexagon socket set
screw.

4.1.2 Preparing Bakeout of the Sensor|

Preparing bakeout

1 Connect the gauge to the power supply for at least 10s to copy the calibration data.
2 Remove the power supply and the electronics unit.
3 To prevent damage, remove the calibration print on the sensor.
4 Put the calibration print into electronic waste.
ð Sensor is ready for bakeout.

4.1.3 Using the Optional Baffle|

In severely contaminating processes and to protect measurement electrodes optically against
light and fast charged particles, replacement of the built-in grid by the optional baffle is recommended.

Requirement

The gauge is deinstalled.

Required tools /material·

Baffle·Pointed tweezers·

Pin (e.g. pencil)·

Screwdriver No 1

Baffle Installation

1 Carefully remove the grid with tweezers.

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2 Carefully place the baffle onto the sensor opening.

3 Using a pin, press the baffle down in the center until it catches.

Baffle Deinstallation

12

4 Carefully remove the baffle with the screwdriver.

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Installation | 4

4.2 Power Connection|

4.2.1 Use With INFICON VGC50x Vacuum Gauge Controller|

If the gauge is used with an INFICON VGC50x, a corresponding sensor cable and the latest
firmware version are required (www.inficon.com). The sensor cable enables supplying thegauge with power, transmitting measurement values and gauge statuses, and making parameter settings.

Caution
Data transmission errors
The attempt to operate a fieldbus gauge with the VGC50x Vacuum Gauge Controller (RS232C)
causes data transmission errors.
· Fieldbus gauges must not be operated with an INFICON VGC50x / VGC40x controller.
Connect the gauge to the INFICON controller with the corresponding sensor cable.

4.2.2 Use With Other Controllers|

The gauge can also be operated with other controllers.
Especially the fieldbus version BAG552 with EtherCAT is usually operated as part of a network,
controlled by a master or bus controller. In such cases, the control system has to be operated
with the appropriate software and communication protocol.

4.2.2.1

Making an Individual Sensor Cable|

For reasons of compatibility, the expression "sensor cable" is used for all BAG552
versions in this document, although the pressure reading of the gauges with fieldbus
interface BAG552 with EtherCAT is normally transmitted via EtherCAT.
The sensor cable is required for supplying all BAG552 types with power. It also enables access to the relay contacts of the switching functions.
If no sensor cable is available, make one according to the following diagram:Emission3
reserved

6
4

SP 1

1
11

SP 2

9
TxD

13
RS232

RxD

14

Degas

7

Degas

2

Measuring
signal121.25 AT42 kΩ

8Ident.

10

24 V

5
15

Common (power GND 24V supply)

9

1

15

8

Ground (housing, vacuum connection)

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D-sub, 15-pin,
female,soldering side13

4 | Installation

INFICON

Pin 1

Relay switching function SP 1, common

Pin 2

Measuring signal output

0 ... +10,13 V

Pin 3

Emission on, active high

0 V/+24 V

Pin 4

Relay switching function SP 1, NO

Pin 5

Supply common

Pin 6

Do not connect

Pin 7

Degas on, active high

0 V/+24 V

Pin 8

Supply

+24 V

Pin 9

Relay switching function SP 2, common

Pin 10Gauge identification

Pin 11

Relay switching function SP 2, NO

Pin 12

Measuring signal common

Pin 13

RS232C, TxD

Pin 14

RS232C, RxD

Pin 15

Do not connect

0V

For cable lengths up to 5 m (0,34 mm2 conductor cross-section) the output signal canbe measured directly between the positive signal output (Pin 2) and supply common
GND (Pin 5). At greater cable lengths, differential measurement between signal output (Pin 2) and signal common (Pin 12) is recommended.

4.2.2.2

Making two EtherCAT Interface Cables|

If no Ethernet cables are available, make two according to the following indications.

Cable type

Shielded Ethernet Patch cable (quality CAT5e or higher).
Pin assignment:
FCC68, 8-pin,male, soldering side

8

1

Pin 1

TD+ Transmission data +Pin 2

TD– Transmission data –Pin 3

RD+ Receive Data +Pin 4

not usedPin 5

not used

Pin 6

RD– Receive Data –Pin 7

not usedPin 8

not used

1 Connect the Ethernet cables (and sensor cable) to the gauge: From the previous device thecable connected to the <OUT> port has to be connected to the BAG552 <IN> port. And thecable from the BAG552 <OUT> port has to be connected to the next device's <IN> port.

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Installation | 4

FCC68 cable<OUT> port

Sensorcable

FCC68 cable<IN> port

2 Secure the sensor cable connector using the lock screws.

4.2.3 Using the Optional Power Supply (With RS232C Line)|The optional 24 V power supply allows RS232C operation of the BAG552 gauge with any suitable instrument or control device.
The instrument or control device needs to be equipped with a software that supports theRS232C protocol of the gauge.

Technical data

Mains connection
Mains voltage
Mains cable

100 ... 240 V (AC) 47 ... 63 Hz
1.8 meter (Schuko DIN and U.S. connectors)

Output (operating voltage of gauge, Vs)
Voltage
Current

21 ... 27 V (DC), set to 24 V (DC)max. 1,5 A

Gauge connection
Connector
24 V (dc) cable

D‑sub, 15 pin, female
5 m, blackConnection of the instrument or control device
RS232C connection
D‑sub, 9-pin, female
Cable
5 m, black, 3 conductors, shielded

Wiring diagram

8
7
6
4
BAG552D-sub
15-pin

5

5

13

2

14

3

RS232C
D-sub
9-pin

8
5
+24 V

L

(dc)
GND

Mains
100...240 V (ac)PE 47...63 Hz
N

(ac)

PE

Connecting the power
supply1 Connect the power supply to the gauge and lock the connector with the screws.
2 Connect the RS232C line to the instrument or control device and lock the connector with thescrews.

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RS232CPC

Power supply
Mains
BAG5523 Connect the power supply to the mains.

5 Operation|

5.1 Putting the Gauge Into Operation|

1 Apply supply voltage.
2 To prevent excessive contamination, make sure that pressure is below 2x10-2 mbar.
3 Switch on emission via pin 3 (high active) or field bus / RS232.
ð The measuring signal is available at the signal output (stabilizing time approx. 10 s).
ð If pressure rises over the switching threshold (p = 3.2×10-2 mbar), the hot cathode isswitched off automatically.
ð Communication via the digital interfaces is described in separate sections of this document.

5.2 Degas|

Contamination

Gauge failures due to contamination or wear and tear, as well as expendable parts(e.g. filament), are not covered by the warranty.
Deposits on the electrode system of the BA sensor can lead to unstable measurement readings.
The degas process allows in-situ cleaning of the electrode system by heating the electron collector grid to approx. 700 °C by electron bombardment.
Depending on the application, this function can be activated by the system control via one of thegauge's digital interfaces. The BAG552 automatically terminates the degas process after 3 minutes, if it has not been stopped before.
The degas process can be run at pressures below 7.2×10-6 mbar.
For a repeated degas process, the control signal first has to change from On to Off. Then degas
can be started again with a new On command. To achieve an unambiguous operating status, it
is recommended that the degas signal is set to Off again by the system control after 3 minutes
of degassing.
A new degas cycle can only be started after a waiting time of 30 minutes.

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Operation | 5

5.3 Filament Status|

5.3.1 Filament Status Indicator|

The status of the dual filament hot cathode is indicated by a LED on top of the gauge.

Filament status

Emission

Filament status indicator
(FIL)

–

off

off

Both filaments O.K.

on

green

One filament broken

ongreen, flashing

Both filaments broken

on

red

INFICON recommends the replacement of the sensor as soon as the first filament failure has been detected.

5.3.2 Filament Status Relay (Only without fieldbus)|

The BAG552 without fieldbus features a "Filament status" relay contact available at the sensor
cable connector:
Filament status

Relay contact(This is an option for SP2)

Both filaments O.K.

closedOne filament broken

open

Both filaments broken

open

5.3.3 Filament Status via Interface|

The filament status can be read via the serial interfaces:
Gauge

Interface

Detailed information

BAG552

RS232C® 2 21

BAG552 EtherCAT

EtherCAT® & [3], ® & [4]5.4 Filament Selection|

Via Diagnostic-Port(RS232C)

In the default automatic operating mode (AUTO), the gauge alternately selects one of the two
filaments (in each case when the emission is switched on). This ensures uniform aging of the filaments.
The selection can also be made manually (MAN) via the diagnostic port, RS232 or on the display.

5.5 Trip Points / Setpoints|

The gauge has two relays which get activated / deactivated according to the installed setpoints.
The setpoints can be set by EtherCAT (see EtherCAT manual), diagnostic port or on the display.
The status of the setpoints / trip points determines if the gauge pressure is below or above acertain value. The status of the low trip point is on, if the pressure falls below a certain thresholdvalue. Hence, the status of the high trip point is on, if the pressure surpasses a certain thresholdvalue. To prevent a toggling behavior of the status at pressure close to the threshold value, ahysteresis is added to the threshold value.
The threshold value can be set directly, which is called Standard mode. In Standard mode thesetpoint value is defined by the parameter High Trip Point / Low Trip Point.
The functionality of the two setpoints and the setpoint mode is described below.

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Low Trip Point (default)

INFICON

If the pressure in the vacuum system is lower than the setpoint, the corresponding LED (<SP1>
or <SP2>) is lit solid and Status Low Trip Point 1/2 is set to 1. The corresponding relay isclosed.

The setpoints SP1 and SP2 are factory set to the lower measurement range limit and therefore
do not switch.

High Trip Point

If the pressure in the vacuum system is higher than the setpoint, the corresponding LED(<SP1> or <SP2>) is lit solid and Status High Trip Point 1/2 is set to 1. The corresponding relay
is closed.

High & Low Trip Point

Both a High Trip Point and a Low Trip Point are assigned to each setpoint.
If the pressure in the vacuum system is higher than the defined High Trip Point threshold, thecorresponding LED (<SP1> or <SP2>) is lit and Status High Trip Point 1/2 is set to 1. The corresponding relay is closed.
If the pressure in the vacuum system is lower than the defined Low Trip Point threshold, the corresponding LED (<SP1> or <SP2>) is lit and Status Low Trip Point 1/2 is set to 1. The corresponding relay is closed.

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Operation | 5

5.6 Display|

5.6.1 Display Structure|

Filament 2 on cycles (only if two filaments are available)

Info screens

Filament 1 on cycles

Protected area

Filament 2 run hours (only if two filaments are available)

Public area

Filament 1 run hours
Gauge run hours
Status / Infofilaments / setpoints
Gauge control

Emission on / off (only if emission control mode is set to manual)Degas on / off
Pirani adjust (only if a Pirani is present)

Setpoint 1

Setpoint mode
Setpoint level or factor (factor only in combination with ATM-sensor)

Setpoint 2

Setpoint mode
Setpoint level or factor (factor only in combination with ATM-sensor)

Settings

Emission control mode (only if a Pirani is present)
Filament control mode (only if two filaments are available)
Filament selection (only if filament mode is set to manual and two filaments are available)
Data unit
Regulator type

Display options

Screensaver timeout
Display orientation
Display background
Display data unit (only if data unit is set to Counts)

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5 | Operation

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5.6.2 User Interface Basics|

Measuring value

Unit (mbar, Torr, Pa, hPA, Mic, Cnts)

Measuring principle (BA = Bayard Alpert,
P = Pirani, C = Capacitance Diaphragm)

Pressure bar

UpCancel / Return

Down

Enter

There is an internal timeout to come back to the previous menu.
Touch key

Menu

Parameter

Value

Up and Down

Select menu

Select parameter

Select valueEnter

Access menu

Access parameter

Save value

Cancel / Return

Return to previous
menu

Return to previous
menu

Discard value

5.6.3 Starting the Degas Process|

1 Check conditions for executing the degas process (® 2 16).
2 Start or stop the degas process of the hot ion gauge with Enter.

5.6.4 Switching on Emission|

1 Check conditions for switching on/off the emission current (Emission Control Mode).
2 Switch on/off the emission of the hot ion gauge with Enter.

5.6.5 Setting Setpoint 1 or 2
|

20

Off

The setpoint is deactivated.

LTP

The setpoint is activated and works as Low Trip Point.

HTP

The setpoint is activated and works as High Trip Point.

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Operation | 5

1 Set the setpoint mode.
ð Depending on the selected setpoint type the level or pressure screen appears.
2 Set the setpoint level.
For a standard Low or High Trip Point a pressure value can be chosen.
3 Confirm each digit with Enter.
After the last digit the new value will be checked and saved.
Following this, a failure or success screen is shown.

5.7 RS232C Interface|

The built-in RS232C interface allows transmission of digital measurement data and instrument
conditions as well as the setting of instrument parameters.

Caution
Data transmission errors
The attempt to operate a fieldbus with the RS232C interface causes data transmission errors.
· Fieldbus gauges must not be operated with the RS232C interface.

5.7.1 Description of the Functions|

The interface works in duplex mode. A nine byte string is sent continuously without a request
approx. every 8 ms. Commands are transmitted to the gauge in a five byte input (receive) string.

Operationalparameters

Electrical connections

5.7.1.1·

9600 Baud·8 data bits·

1 stop bit·

no parity bit·

no handshake

SignalSensor cable connector

TxD

Pin 13RxD

Pin 14

GND

Pin 5

Output String (Transmit)|

The complete output string (frame) is nine bytes (byte 0 … 8). The data string is seven bytes(byte 1 … 7).

Format of the output
stringSynchronization

Byte No. Function

Value

Comment

0

Length of data string7

set value

1

Page number

5

for hot cathode gauges

2

StatusStatus byte

3

Error

Error byte

4

Measurement high byte 0 ... 255

Calculation of pressure value

5

Measurement low byte

0 ... 255

Calculation of pressure value

6

Software version

0 ... 255

Software version

7

Response value

14

for BAG552

8

Check sum

0 ... 255

Synchronization

Synchronization of the master is achieved by testing three bytes:
Byte No. Function

Value

0

Length of data string

7

1

Page number

5

for hot cathodegauges8

Check sum of bytes 1 ... 7

0 ... 255

Low byte of checksum 1)

1)

Comment

High order bytes are ignored in the check sum.

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5 | Operation

Status byte

Error byte

INFICON

Bit 1

Bit 0

Definition

00emission off

01

emission 25 µA

10emission 5 mA

1

1

degas

Bit 2

Definitionx

reserved for future use

Bit 3

Definition0⇔1

toggle bit, changes with every
string received correctly

Bit 5

Bit 4

Definition00current pressure unit mbar

01

current pressure unit Torr10current pressure unit Pa

Bit 6

Definition0

filament 1 active

1

filament 2 active

Bit 7

Definitionx

reserved for future use

Bit Nr.

Definition0

reserved for future use

1

reserved for future use

2

reserved for future use

3

reserved for future use

4

BA sensor error

5reserved for future use

6

hardware failure, EEPROM failure

7

reserved for future use

Software version

The software version of the gauge can be calculated from the response value of byte 6 of thetransmitted string according to the following rule:
Version No = ValueByte 6 / 20
(Example: According to the above formula, ValueByte 6 of 32 means software version 1.6)

Calculation of thepressure value

The pressure can be calculated from bytes 4 and 5 of the transmitted string. Depending on thecurrently selected pressure unit (byte 2, bits 4 and 5), the appropriate rule must be applied.
As result, the pressure value results in the usual decimal format.
pmbar = 10((high byte × 256 + low byte) / 4000 - 12.5)
pTorr = 10((high byte × 256 + low byte) / 4000 - 12.625)
pPa = 10((high byte × 256 + low byte) / 4000 - 10.5)

ExampleThe example is based on the following output string:
Byte
No.

0

1

2

3

4

5

6

7

8

Value

7

5

0

0

117

48

20

14

204

The instrument or controller (receiver) interprets this string as follows:

22

Byte No.

Function

Value

Comment

0

Length of data string7

set value

1

Page number

5

hot cathode gauges

2

Status0emission = off
Pressure unit = mbar

3

Error

0

No error

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Operation | 5

5.7.1.2

Byte No.

Function

Value

Comment

4
5

Measurement
High byte
Low byte

117
48

Calculation of the pressure:p = 10((117 × 256 + 48) / 4000 - 12.5) = 1x10-5) mbar

6

Software version

20

Software version = 20 / 20 = 1.0

7

Sensor type14

BAG552

8

Check sum204

5 + 0 + 0 + 117 + 48 + 20 + 14 =204dec = 00 CChex
High order byte is ignored
Check sum = CChex = 204dec

Input String (Receive)|

For transmission of the commands to the gauge, a string (frame) of five bytes is sent (without<CR>). Byte 1 to byte 3 form the data string.

Format of the input
stringByte No.

Function

Value

0

Length of data
string3

1

Data➔ admissible input strings

2

Data

➔ admissible input strings

3

Data

➔ admissible input strings

4

Check sum(of Bytes
No. 1 ... 3)

1)

Admissible input
strings

Comment(low byte of sum) 1)

0 ... 255

High order bytes are ignored in the check sum.

For commands to the gauge, following defined strings are used:
Byte No.
Command:
Set the unit mbar on the display

1)

Set the unit Torr on the display 1)
Set the unit Pa on the display

1)

0

1

2

3

4 2)

3

0x10

0x8E

0

0x9E

3

0x10

0x8E

1

0x9F

3

0x10

0x8E

2

0xA0

Switch degas on (switches itself off after
3 min.)

3

0x10

0xC4

1

0xD5

Switch degas off (before 3 min.)

3

0x10

0xC4

0

0xD4

Read software version

3)

3

0x00

0xD1

0

0xD1

Reset

3

0x40

0

0

0x40

Switch emission on 4)

3

0x40

0x10

1

0x51

4)

3

0x40

0x10

0

0x50

3

0x10

0xD3

0

0xE3

Switch emission off

Set Filament Control Mode to AUTO 5)
Set Filament Control Mode to MAN

5)

3

0x10

0xD3

1

0xE4

Select filament 1 6)

3

0x10

0xD2

0

0xE2

6)

3

0x10

0xD2

1

0xE3

3

0x00

0xD4

0

0xD4

Select filament 2

Read filament status
1)

Only required for gauges with display. Transmitted data is not affected by this setting.
Only low order byte of sum (high order byte is ignored).
3)
Response value in byte no. 6 of transmitted string.
4)
On/off switching requirements
5)
Defines the Filament Control Mode
AUTO = Selection of filament automatically controlled by the gauge
MAN = Selection of filament controlled via interfaces.
6)
The "Select filament x" command can be sent any time but is only executed if the gauge is in
the "Emission OFF" state.
2)

5.8 EtherCAT Interface|

The physical interface and communication firmware of the BAG552 comply with the EtherCAT
standard.

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6 | Deinstallation

INFICON
Two adjustable switching functions are integrated in BAG552. The corresponding relay contacts
are available at the sensor cable connector.
The basic sensor and sensor electronics of all BAG552 gauges are identical.

Caution
Data transmission errors
If the gauge is operated via RS232C interface and EtherCAT interface at the same time, datatransmission errors may occur.
· The gauge must not be operated via RS232C interface and EtherCAT interface at the sametime.

5.8.1 Description of the Functions|

Via this interface, the following and further data are exchanged in the standardized EtherCAT
protocol:·Pressure reading·

Pressure unit (mbar, Torr, Mic, Pa, hPa)·

Degas function·

Gauge adjustment·

Status and error messages·

Status of the switching functions

5.8.2 Operating Parameters|

As the EtherCAT protocol is highly complex, the parameters and programming of BAG552 aredescribed in detail in the separate Communication Protocol.

5.8.2.1

Operating Software|

For operating the gauge via EtherCAT, prior installation of the device specific ESI file is requiredon the bus master side. This file can be downloaded from our website (www.inficon.com).

5.8.2.2

Explicit Device Address Setting|

During device initialization, the device address switches are read by the device firmware. This
device address is supported to the master as Explicit Device Identification.
Three switches are supplied via <x100>, <x10> and <x1>.

5.8.3 Status Indicators|

Two LEDs on the gauge inform on the gauge status and the current EtherCAT status.

6 Deinstallation|

DANGER
Contaminated parts
Contaminated parts can be detrimental to health and environment.
· Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions when handling contaminated parts.

CautionVacuum component
Dirt and damages impair the function of the vacuum component.
· When handling vacuum components, take appropriate measures to ensure cleanliness andprevent damages.

24

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Maintenance, Repair | 7

CautionDirt sensitive area
Touching the product or parts thereof with bare hands increases the desorption rate.
· Always wear clean, lint-free gloves and use clean tools when working in this area.

Procedure

1 Vent the vacuum system.
2 Take gauge out of operation.
NOTICE! Before taking the gauge out of operation, make sure that this has no adverse effect on the vacuum system. Depending on the programming of the superset
controller, faults may occur or error messages may be triggered. Follow the appropriate shut-down and starting procedures.
3 Disconnect all cables from the gauge.
4 Remove gauge from the vacuum system and replace the protective lid.

7 Maintenance, Repair|

7.1 Maintenance|

DANGER
Contaminated parts
Contaminated parts can be detrimental to health and environment.
· Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions when handling contaminated parts.

7.1.1 Cleaning the Gauge|

Small deposits on the electrode system can be removed by baking the anode. In the case of severe contamination, the baffle can be exchanged easily. The sensor itself cannot be cleaned
and needs to be replaced in case of severe contamination.
A slightly damp cloth normally suffices for cleaning the outside of the unit. Do not use any aggressive or scouring cleaning agents.
Make sure that no liquid can penetrate the product. Allow the product to dry thoroughly before putting it into operation again.

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7 | Maintenance, Repair

INFICON

Gauge failures due to contamination or wear and tear, as well as expendable parts(e.g. filament), are not covered by the warranty.

7.2 What to Do in Case of Problems|

In the event of a fault or a complete failure of the output signal, the gauge can easily bechecked.

Required tools /material

Troubleshooting·

Voltmeter / ohmmeter·

Allen key, AF 2.5·

Spare sensor (if the sensor is faulty)

The output signal is available at the sensor cable connector (Pin 2 and Pin 12).
In case of an error, it may be helpful to just turn off the mains supply and turn it on
again after 5 s.
Problem

Display

Possible cause

No voltage at sig- off
nal output.

LED <ST>dark

No voltage supply Turn on power
supply.

Output signal:
0.1V 2)"FAILURE EEPROM Memory"

EEPROM error

blinking red

Correction

Switch the gauge
off and on again
after 5 s.
Replace the sensor

Output signal:
0.3V 2)

Troubleshooting(sensor)lit solid red"FAILURE Hot
Ion. Gauge"

Hot cathode sen- Replace the sensor errorsor

If the cause of a fault is suspected to be in the sensor, the following checks can be made withan ohmmeter (the vacuum system need not be vented for this purpose).
Separate the sensor from the electronics unit. Using an ohmmeter, make the following measurements on the contact pins.
Ohmmeter measurement
between pinsOK

Not OK

Possible cause

F1-FC und F2-FC≈0,15 Ω>>0,15 ΩFilament of hot cathodebrokenF1, FC, F2 - GND

∞

<< ∞

Electrode short circuit togroundA - GND∞<< ∞Electrode short circuit togroundCautionElectrostatic discharge (ESD)All unmarked pins in the diagram are used by the diaphragm sensor electronics and cannot beutilized for diagnostic purposes due to electrostatic discharge (ESD).
· Do not connect an ohmmeter/continuity checker to these pins.

2)26Standard output voltage (depending on setting for safe value)
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Options | 8

Correction

All of the above faults can only be remedied by replacing the sensor.

Troubleshooting on
Fieldbus Gauges

Error diagnosis of fieldbus gauges can only be performed as described above for the basic sensor and sensor electronics. Diagnosis of the fieldbus interface can only be done via the superset
bus controller.

7.3 Replacing the Sensor|

Replacement is necessary, when

Required tools /material·

the sensor is severely contaminated·the sensor is mechanically deformed·

the sensor is faulty, e.g. hot cathode broken·

Allen key, AF 2.5·

Spare sensor

1 Deinstall the gauge.
2 Deinstall the electronics unit from the faulty sensor and mount it to the new sensor.

8 Options|

Part number
24 V (dc) power supply / RS232C line

353‑511

Baffle DN 25 ISO‑KF / DN 40 CF-R

353-512

Seal with centering ring and baffle
DN 25 ISO‑KF

211‑113

9 Spare Parts|

When ordering spare parts, always indicate:·

All information on the product nameplate·

Description and part number
Part number

Replacement sensor BAG552, vacuum connection DN 25 ISO‑KF(including allen key)352-420

Replacement sensor BAG552, vacuum connection
DN 40 CF‑R (including allen key)352-421

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10 | Storage

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10 Storage|

CautionVacuum component
Inappropriate storage leads to an increase of the desorption rate and/or may result in mechanical damage of the product.
· Cover the vacuum ports of the product with protective lids or grease-free aluminum foil.
· Do not exceed the admissible storage temperature range.

11 Returning the Product|

WARNING
Forwarding contaminated productsContaminated products (e.g. radioactive, toxic, caustic or biological hazard) can be detrimental
to health and environment.
· Products returned to INFICON should preferably be free of harmful substances. Adhere to theforwarding regulations of all involved countries and forwarding companies and enclose a duly
completed declaration of contamination (form under www.inficon.com).
Products that are not clearly declared as "free of harmful substances" are decontaminated at
the expense of the customer.
Products not accompanied by a duly completed declaration of contamination are returned to thesender at his own expense.

12 Disposal|

DANGER
Contaminated parts
Contaminated parts can be detrimental to health and environment.
· Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions when handling contaminated parts.

WARNING
Substances detrimental to the environment
Products or parts thereof (mechanical and electric components, operating fluids etc.) can be
detrimental to the environment.
· Dispose of such substances in accordance with the relevant local regulations.

Separating the components
After disassembling the product, separate its components according to the following criteria:

28·

Contaminated components
Contaminated components (radioactive, toxic, caustic or biological hazard etc.) must be decontaminated in accordance with the relevant national regulations, separated according totheir materials, and disposed of.

·Other components
Such components must be separated according to their materials and recycled.

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Appendix

Appendix
A: Relationship Measuring Signal – Pressure
Conversion formulae

p = 10(U ‑c)
U = c + log p
where

where

U

p

c

[V]

[mbar]

9.875[V][Torr]

10

[V]

[Mic]

7

[V]

[Pa]

7.875

[V]

[hPa]

9.875

p pressure
U measurement signal
c constant (pressure unit dependent)

B: Gas Type Dependance
Calibration in pressure
range<2×10-2 mbar

The gas type dependence in the pressure range <2×10-2 mbar can be compensated by meansof the following formula (gauge adjusted for air):peff = C × indicated pressure
where

Gas type

Calibration factor C

He

5.9

Ne

4.1

Ar

0.8

Kr

0.5

Xe

0.4

H2

2.4

Air, O2, CO, N2

1(The above calibration factors are mean values.)
A mixture of gases and vapors is often involved. In this case, accurate determinationis only possible with a partial-pressure measuring instrument.

Literature& [1]Communication Protocol BAG552
EtherCAT BAG552
INFICON AG, LI–9496 Balzers, Liechtenstein& [2]Communication Protocol
Serial Interface RS232C, RS485C
BAG500, BAG552, BPG500, BPG552, BCG552
tirb89e1& [3]ETG.5003.1 S (R) V1.1.0: Semiconductor Device profile – Part 1: Common Device
Profile (CDP)& [4]ETG.5003.2080 S (R) V1.3.0: Semiconductor Device profile – Part 2080: Specific
Device Profile (SDP): Vacuum Pressure Gauge

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29

EU Declaration of Conformity

INFICONEU Declaration of Conformity
We, INFICON, hereby declare that the equipment mentioned below complies with the provisionsof the following directives:·

2014/30/EU, OJ L 96/79, 29.3.2014(EMC Directive; Directive relating to electromagnetic compatibility)·

2011/65/EU, OJ L 174/88, 1.7.2011(RoHS Directive; Directive on the restriction of the use of certain hazardous substances in electrical and electronicequipment)

Product
Trigon™ BAG552
Bayard-Alpert SingleGauge

Standards
Harmonized and international/national standards and specifications:·

EN 61000‑6‑2:2005 (EMC: generic immunity standard)·

EN 61000‑6‑3:2007 + A1:2011 (EMC: generic emission standard)·

EN 61010‑1:2010 + A1:2019 + A1:2019/AC:2019 (Safety requirements for electrical equipment for measurement, control and laboratory use)·

EN 61326‑1:2013; Group 1, Class B (EMC requirements for electrical equipment for measurement, control
and laboratory use)

Manufacturer / Signatures
INFICON AG, Alte Landstraße 6, LI-9496 Balzers
28 September 2023
28 September 2023

Rolf Enderes
Director Development & Software

30

Marco Kern
Product Manager

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INFICON

UKCA Declaration of Conformity

UKCA Declaration of Conformity
We, INFICON, hereby declare that the equipment mentioned below complies with the provisionsof the following regulations:·

S.I. 2016/1091, 11.2016(EMC Regulation; Regulation relating to electromagnetic compatibility)·

S.I. 2012/3032, 12.2012(RoHS Regulation; Regulation on the restriction of the use of certain hazardous substances in electrical and electronicequipment)

Product
Trigon™ BAG552
Bayard-Alpert SingleGauge

Standards
Harmonized and international/national standards and specifications:·

EN 61000‑6‑2:2005 (EMC: generic immunity standard)·

EN 61000‑6‑3:2007 + A1:2011 (EMC: generic emission standard)·

EN 61010‑1:2010 + A1:2019 + A1:2019/AC:2019 (Safety requirements for electrical equipment for measurement, control and laboratory use)·

EN 61326‑1:2013; Group 1, Class B (EMC requirements for electrical equipment for measurement, control
and laboratory use)

Manufacturer / Signatures
INFICON AG, Alte Landstraße 6, LI-9496 Balzers
28 September 2023
28 September 2023

Rolf Enderes
Director Development & Software

tinb87e1 (2023-09) BAG552.om

Marco Kern
Product Manager

31

LI–9496 Balzers
LiechtensteinTel +423 / 388 3111
Fax +423 / 388 3700
reachus@inficon.com
www.inficon.com