BEANS Project BoothThis year will be the second that the BEANS Project
participates in the Exhibition Micromachine/MEMS, the firstbeing in July of last year. The BEANS Project booth will beexpanded from last year’s five exhibit spaces (one space is 3x3meters) to twelve exhibit spaces. The booth is being sponsoredjointly by the New Energy and Industrial Technology
Development Organization (NEDO) and the BEANS
Laboratory. The BEANS Project booth is located in a corner ofthe exhibition hall far from the entrance, but is adjacent to both
the Micromachine Center booth and Conference Areas A and Bat which various seminars will be held during the exhibition.
Since the level of recognition for the BEANS Project itself
was low last year, our exhibits were focused on raising

In coordination with the booth exhibits, the 4 th BEANS

awareness of the BEANS Project. It will be important this year

Project Seminar will be held in Conference Area B on theas well to increase awareness of BEANS among industry

afternoon of July 29. Please don’t miss the seminar, as allinsiders, but the primary objective will be to publicize

interim results of the BEANS Project will be presented.

achievements of the project, as this is the interim evaluation
period. Thus, in coordination with a report of achievements

G-device Project Booth

given at the BEANS Project Seminar, which is to be held on theafternoon of July 29 during the exhibition, we hope to take this

The G-device Project was added to the NEDO-sponsoredopportunity to illustrate what important achievements the“Hetero-functional Integrated Device Technology Development

BEANS Project has produced over a mere two years since its

Project (BEANS Project)” and launched in April this year. The

inception and how the level of achievement has exceeded

challenges taken up in this project are to develop an advancedexpectations.

sensor network system and environmentally friendly processes.

The booth itself is an “island” surrounded on all four sides

In order to develop an advanced sensor network system, an

by passageways. An emblem of the bright green sprouting bean

experimental system will be installed in a clean room forplant that has been the symbol of BEANS will adorn thefabricating large-diameter (8-inch) MEMS in order to monitor

entrance to this island, and the interior of the booth will beenergy consumption, temperature, pressure, air volume, foreign

furnished with carpeting and other elements in a matchingparticles, gas, and other factors in the clean room and togreen. We have no intention of putting up walls or otheranalyze their effects on energy savings and the reduction of

barriers between the booth and the passageways, so as to give

carbon content. The G-device booth will provide demonstrations

the booth a fairly open feel, but we are considering how to

on controlling an air conditioning system and the like, while

control traffic flow within the booth in order that visitors willsensing temperature, humidity, and foreign particles at various

see everything on display. The entrance to the booth is thepoints in order to illustrate the concept of the project. Anothermain exhibit zone, which connects to various inner zones

goal of the project is to verify the effects of a sensor network

devoted to 1) Macro BEANS, 2) 3D BEANS Tokyo, 3) Lifesystem installed in a plant factory for detecting temperature,

BEANS Kyushu, and 4) Life BEANS Tokyo, for example.

light, humidity, and other conditions in the factory on energy

The display items provided for each center are essentiallysavings and productivity in crop cultivation. A miniature plantposters, mock-ups or the actual articles, and display monitors

factory will be exhibited at the booth to demonstrate thisshowing animated or live-action video. Highlights planned forprocess.

the exhibition are (1) new lifestyles created by BEANS (in theIn the task for developing environmentally friendly

main zone); (2) photographs depicting low-damage, neutral

processes, our research entails developing an efficient etching

beam etching, models for elucidating the mechanism ofprocess with low-environmental impact, integrating hybrid

supercritical films, trench capacitors, patterning using peptides,

devices at the wafer level, using MEMS to reduce theand true 3D machining; (3) large panel displays and an exhibit

environmental impact of processes and devices, and sharingof actual glowing microbeads related to a hybrid cell doll

eco-friendly information at the design stage. The details ofcreated from hydrogel beads and a glowing ear that reflects

these processes will be introduced at the exhibition.

changes in blood sugar level; and (4) animation simulating

We are looking forward to telling you about the G-devices

weaving experiments and non-vacuum deposition for a study onthat will drive green innovation, so please do visit our booth atfiber substrates with nanostructures and a meter-size fabricthe exhibition.

touch sensor.

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