CONTENTSPREFACE ....................................................................................................................... γ
CONTENTS ......................................................................................................................  ε
ORGANIZATION ................................................................................................ η
CURRENT STATUS OF NewSUBARUNewSUBARU Storage Ring ..................................................................................  1
Beamlines ..............................................................................................................  3
Center for EUV Lithography ................................................................................  9Study on High Brightness Operation of NewSUBARU without RF Shaker ......  11
RESEARCH ACTIVITIESUpgrade Plan of 15MeV Compact Electron Linear Accelerator LEENA asa Terahertz Radiation Source ...........................................................................  13Photonuclear reaction of iodine-129 with laser-Compton scattering gamma-ray 15
Determination of the number of pulsed laser-Compton scattering photons ......  17
Resonant Photonuclear Reactions for Isotope Transmutation ...........................  21
Soft X-ray Source by Laser Produced Xe Plasma ................................................  27
Characterization of a laser-plasma extreme-ultraviolet source using
a rotating cryogenic Xe target ...........................................................................  29
Soft X-Ray from Laser-Produced Xe and Sn Plasmas in a Wide
Wavelength Range .............................................................................................  31
Study on Powder Transport Using Surface Acoustic Wave Actuator ..................  33
HIGH-SENSITIVE DETECTION OF POLYCHLORINATED BIPHENYLON THREE-DIMENSIONAL LAB-ON-A-CD ..................................................  35
Fabrication of Integrated Magneto Impedance Sensor for Medical Monitoring  37
Fabrication of Gold Nanoparticles Assembled Nanovalleyfor Surface
Enhanced Raman Scattering ..............................................................................  39
Coherent Scatterometry Microscope (CSM) .........................................................  41
EUV Finished Mask Observation utilizing EUV Microscope .............................  42
EUV Interference Lithography .............................................................................  43
In-situ contamination thickness measurement in the EUV
resist outgassing environment ..........................................................................  44
Optical element evaluation system ......................................................................  45
Classification of Near-Edge X-ray Absorption Fine
Structure Spectra of Si-containing DLC Thin Films .......................................  46
Sulfur L3.2-edge XANES spectroscopy reveals differencesin sulfur speciation of reference S compounds  .............................................  48
The Present Status of Material Analysis Beamline
at BL05 for Industrial Enterprises ...................................................................  49
Low-Temperature Crystallization of a-Si, a-Ge anda-SiGe Films by Soft X-ray Irradiation ............................................................  51

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Photoelectron Spectroscopy Study of the Valence Band
Region in Diamond-Like Carbon Thin Films .................................................  52
Characterization of Crystalline Structure of BN Thin Filmusing Soft X-ray Absorption Spectroscopy .........................................................  54
Modification of Electronic States of Multi-walled Carbon
Nanotubes by Ion Irradiation .............................................................................  56
Damage analysis of gallium nitride crystals etched by He and Ar plasma ........  58
A Development Plan of Sputtering System for Large Scale
Telescope Mirror Coating at Nishi-Harima Astronomical Observatory ............  60
Fabrication of Carbon Membrane X-ray Mask for Deep X-ray
Lithography Technique .....................................................................................  62
Fabrication of Au Structure Using Direct Electroplating on Si Structures .......  64
Fabrication of High Performance Light Guide Plate ...........................................  66
Technique for Preparing Defect-free High Aspect Ratio SU-8
Resist Structure Using X-ray Lithography ......................................................  68
LIST OF PUBRICATIONSPapers ....................................................................................................................  71
International Meetings .........................................................................................  76
Award .....................................................................................................................  83
ACADEMIC DEGREES .................................................................................................  85
EDITORIAR BOAD .................................................................................................. 86

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