35th International Conference on Microelectronic Test Structures
March 27-30, 2023, Takeda Hall, the University of Tokyo, Tokyo, Japan
Looking for the best opportunity to present and discuss your ideas and results about test structures,measurements, and characterization. Join the 35th ICMTS conference.
A Tutorial Short Course will precede the conference sessions. Several of the best measurement, equipment,design, and manufacturing experts, will participate to the equipment exhibition and presentations.
The conference will bring together designers and users of test structures to discuss recent developments andfuture directions, in a one-track program, with convivial breaks allowing attendees to discuss and exchange
viewpoints and challenges.
A Best Paper award will be presented by the Technical Program Committee. The IEEE Electron Devices Society is
the co-sponsor, and all published papers will be submitted for possible inclusion on IEEE Xplore®. Original papers
are solicited presenting new developments in topics relevant to ICMTS, including but not limited to, test
structures, measurements, and results, in the following areas:•••

Designo
Methodologies, VerificationoWithin-die circuits for process characterization/monitoringo
Design enablement – Characterization and validation of digital and analog libraries
oDevices and Circuit Modeling
Measurement techniques
oDC, AC and RF measurements: setup, test and analysis
oReliability test - including thermal stability, failure analysis, prediction, etc.
oStatistical analysis, variability, throughput increase, smart test strategies
oUse of machine learning and AI in analysis of data sets - parameter extraction etc.
oWafer probing, within-die measurements, in-line metrology
oThroughput, testing strategies, yield enhancement and process control tests
Applications
oEmerging memory technologies (single cell, arrays, and application in neural networks)oEmerging transistor technologies for digital/analog/power applications
oPhotonic devices - silicon integration, new displays (OLED, μ-displays)
oFlexible electronics and sensors (organic and inorganic materials)oM(N)EMS, actuators, sensors, PV cells and other emerging devices

The author’s abstract submission consists of up to four pages in PDF format (font-embedded). The first pageshould include a title, a 50-word summary, author name(s), full address, contact number, and e-mail of the leadauthor, and any preference for oral or poster session presentation. The body of the abstract should consist of one
page of text (800 to 1000 words) and up to two pages of major figures and tables.
The selection process will be based on the technical merit and will be highly weighted in favor of abstracts withhigh test structure content (including illustration) along with measurements and analysis.
The submission deadline is 15th October 2022.

Deadline is extended to 15th November

Abstracts can be submitted via the ICMTS website http://www.icmts.net using the “Submit Abstract” link on thefront page.
Notice of paper acceptance will be sent to the selected authors by 17th January 2023, with instructions for
expanded manuscript preparation for the conference proceedings. The deadline for submission of the final paper
will be 17th February 2023.
Please join the ICMTS group at https://www.linkedin.com/groups/3804498, if you have in interest all things test
structure related.
Details of the venue, hotel, registration, etc. will be posted at the ICMTS 2023 official web site. ICMTS is planned
to be in person with the possibility of adding an online component if necessary.
For further technical information, please contact the technical program chair:
Yuzo Fukuzaki, TechInsights. yfukuzaki@techinsights.com

General Chair:
Satoshi Habu
Keysights Technologies, Japansatoshi_habu@keysight.com
Technical Program Chair:
Yuzo Fukuzaki
TechInsights
yfukuzaki@techinsights.com
Tutorial Chair:
Tatsuya Ohguro
Toshiba Electronic Devices & Storage
Corporation
tatsuya.ooguro@toshiba.co.jp
Equipment Exhibition Chair:
Jun Taniguchi
Keysight Technologies, JAPAN
jun_taniguchi@keysight.com
Local Arrangements:
Akio Higo
University of Tokyo
higo@if.t.u-tokyo.ac.jp
Conference Secretariat:
TOBU TOP TOURS CO., LTD.
ICMTS2023@tobutoptours.co.jp
ICMTS Steering Committee:
Asian Representative:
Satoshi Habu
Keysight Technologies, JAPANsatoshi_habu@keysight.com
European Representative:
Hans Tuinout
NXP semiconductors
hans.tuinhout@nxp.com
USA Representative:
Bill Verzi
Semiconductor Test Advisor
william.verzi@gmail.com