SKY ® CDG025D, CDG025D-S
Ambient Capacitance Diaphragm Gauge
The INFICON SKY CDG025D Capacitance Diaphragm
Gauge line of highly accurate temperaturecompensated manometers is designed for stableperformance in harsh manufacturing tool
environments. Advanced digital electronics improvegauge performance and offer easy handling features
such as one push button zero function and setpoint
adjustment. The corrosion resistant ultra pure ceramic
sensor provides excellent zero stability with a long life
expectancy of several million pressure cycles, including
atmospheric bursts. A unique sensor shielding protects
the gauge from process contamination. A robust
mechanical design and digital electronics improve EMC
compatibility, long term stability and temperaturecompensation. The CDG025D sets new standards forfast stability after power on and fast recovery fromatmospheric pressure exposure.

ADVANTAGES• Full scale (FS) ranges from 100 mTorr … 1000 Torr
• Fast stability after power on• Fast recovery from atmospheric pressure• Corrosion resistant ceramic sensor• Excellent long term signal stability• Temperature compensated• Sensor protected from contamination• One push button zero function• Wide range power supply• Two setpoints (optional)• RS232 interface (optional)
APPLICATIONS• Semiconductor manufacturing equipment for Etch, CVD, PVD, ALD• Data storage and display manufacturing equipment• Industrial vacuum equipment• General high accuracy pressure measurement

1SKY® CDG025D, CDG025D-S

SKY ® CDG025D, CDG025D-S
ORDERING INFORMATION

CDG025D, TEMPERATURE COMPENSATEDFull scale (FS)Flange type

TorrPascalmbar

1/2 in. tube

DN 16 ISO-KF

DN 16 CF-R

8 VCR

10001001010.1

133,322
13,332
1,333
133
13.3

1333
133
13.3
1.3
0.13

375-000
376-000
377-000
378-000
379-000

375-001
376-001
377-001
378-001
379-001375-002376-002377-002378-002379-002375-003376-003377-003378-003379-003

CDG025D-S, WITH 2 SETPOINTS AND RS232 INTERFACE, TEMPERATURE COMPENSATEDFull scale (FS)Flange type

Torr

Pascalmbar

1/2 in. tube

DN 16 ISO-KF

DN 16 CF-R

8 VCR

1000
–
200
100–
2010–
1–
0.25
0.1–

133,322
110,000
26,664
13,332
10,0002,666
1,3331,000
133
100
33.3
13.3
10

1333
1,100
267
133
100
26.7
13.3
10
1.3
1
0.33
0.13
0.1

375-300
375-500
382-300
376-300
376-500
383-300
377-300
377-500
378-300
378-500
385-300
379-300
379-500

375-301375-501
382-301
376-301
376-501
383-301
377-301
377-501378-301378-501385-301379-301379-501375-302375-502382-302376-302376-502383-302377-302377-502378-302378-502385-302379-302379-502375-303375-503382-303376-303376-503383-303377-303377-503378-303378-503385-303379-303
379-503bold = standard products
Other flange types on request.

2SKY® CDG025D, CDG025D-S

SKY ® CDG025D, CDG025D-S
SPECIFICATIONS
Full scale (FS)Torr / mbar

1000/1100 ...
200Accuracy1)
Temperature effect

2 ... 0.5

0.2 % of readingon zero0.005 % FS / °C

on span

0.01 % of reading / °C

Resolution
Pressure, max.

400 kPa(absolute)

Response time2)
Lowest reading
Lowest suggested

0.25

0.1

0.25 % of reading

0.5 % of reading

0.015 % FS / °C
0.01 % ofreading / °C
0.003 % FS260 kPa (absolute)

0.02 % FS / °C
0.03 % of reading / °C

130 kPa (absolute)

30 ms

130 ms0.01 % FSReading

0.05 % FS

Control pressure
Temperature

0.5 % FS

Operation (ambient)
3)+5 ... +50 °C

Bakeout at flange≤110 °C

Storage
Supply voltage
Power consumption
Output signal (analog)
Degree of protection
Standards–40 ... +65 °C+14 ... +30 V (dc)
≤1 W
0 ... +10 V (dc)
IP 30

CE conformity
ETL certification
Electrical connection
Setpoint
Number of setpoints4)
Relay contact
Hysteresis
Materials exposed tovacuum
Internal volume
Weight3

100 ... 5EN 61000-6-2, EN 61000-6-3, RoHS
EN 61010, UL 61010-1, CSA 22.2 No.61010-1
D-sub, 15-pin, male
2 (SP1, SP2)
30 / ≤0.5 V (dc) / A (dc)
1 % FS
ceramics (AI2O3), Vacon 70, stainless steel (AISI 316L),
AgCuTi hard solder, sealing glass≤4.0 cm3
285 … 342 g1)

Non-linearity, hysteresis, repeatability at 25°C ambient operating temperature without temperature effects after two hours operation

2)

Increase 10 ... 90% FS3)

Non-operation

4)

CDG025D-S onlySKY® CDG025D, CDG025D-S

SKY ® CDG025D, CDG025D-S
DIMENSIONS

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reachus@inficon.com

Due to our continuing program of product improvements, specifications are subject to change without notice.
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