Communication Protocol

Profibus
DP/V1 Interface for Pirani Capacitance Diaphragm and Pirani Standard Gauges

PCG550 PCG552 PCG554
PSG550 PSG552 PSG554

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1

General Information

CautionCaution: data transmission errors
Any attempt to simultaneously operate the gauge via the RS232C
Serial Interface and a Fieldbus interface (DeviceNet or Profibus) or the
diagnostic port may result in incorrect data and data transmission
errors.
Therefore, it is inadmissible to simultaneously operate the gauge via
the RS232C Serial Interface and DeviceNet, Profibus, or the
diagnostic port.

About this Document

This document describes the functionality and programming of the Profibus interface of the Pirani Capacitance Diaphragm Gauges (PCG550, PCG552, PCG554)
and the Pirani Standard Gauges (PSG550, PSG552, PSG554).
For safety information on and further technical data of the gauges,
please refer to the respective operating manuals (→[1], [2]).

Product Identification

In all communications with INFICON, please specify the information on the productnameplate. For convenient reference copy that information into the space provided
below.
INFICON AG, LI-9496 Balzers

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Validity

This document applies to products of the Pirani Capacitance Diaphragm (PCG550,
PCG552, PCG554) and Pirani Standard Gauges (PSG550, PSG552, PSG554) with
Profibus interface.
Part numbers of standard products are indicated below. OEM products have otherpart numbers and different parameter settings (e.g. factory setting of setpoint) as
defined in the corresponding ordering information.

3Pxx-0xx-xx2x
Measuring signal

Receptacle

Display Switching function

0 ⇒ 0.61 ... 10.23 V1 ⇒ 1.2 ... 8.68 V
2 ⇒ 0.375 ... 5.659 V
3 ⇒ 1.57 ... 9.05 V
0 ⇒ FCC1 ⇒ D-Sub, 9-pin
2 ⇒ D-Sub, 15-pin HD
4 ⇒ D-Sub, 15-pin HD, RS485 INF
5 ⇒ Hirschmann, Type GO 6
0 ⇒ None1 ⇒ Display
2 ⇒ 2 switching functions *)3 ⇒ ATM sensor &2 switching functions *)4 ⇒ Display & 2 switching functions *)5 ⇒ Display & ATM sensor &2 switching functions *)6 ⇒ 2 switching functions **)Flange 1 ⇒ DN 16 ISO-KF

2 ⇒ DN 16 ISO-KF long tube
4 ⇒ DN 16 CF-F
5 ⇒ DN 16 CF-R long tube
6 ⇒ DN 25 ISO-KF
D ⇒ 4 VCR female
E ⇒ 8 VCR femaleF ⇒ 1/8" NPTK ⇒ Flange 29×29 mm
M ⇒ 4 VCR female 90°
N ⇒ 7/16-20 UNF male

Unit 0 ⇒ mbar
1 ⇒ Torr
2 ⇒ Pa3 ⇒ micron

Filament

1 ⇒ Tungsten
2 ⇒ Nickel
3 ⇒ Ceramic coated6 ⇒ Tungsten, galvanically isolated
7 ⇒ Nickel, galvanically isolated
8 ⇒ Ceramic coated, galvanically isolated

Product family

C ⇒ Pirani Capacitance Diaphragm Gauge
I ⇒ Pirani Standard Gauge*) Solid state relay**) Electromechanical relay

The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this document
correspond to PCG550 gauges with the DN 16 ISO-KF vacuum connection. They
apply to other vacuum connections and to the other gauges by analogy.
We reserve the right to make technical changes without prior notice.

Trademarktira56e1(2010-02)

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SEMI®

Semiconductor Equipment and Materials International, California

3

Contents

4

General Information
About this Document
Product Identification
Validity
Trademark

2
2
2
3
3

1 Technical Data

7

2 Interface Connection

9

3 General Data
3.1 Introduction
3.2 Operating Software
3.3 Node Address
3.4 "NET" LED3.5 Data Rate
3.6 Ident Number
3.7 Configuration Data
3.8 User Parameter Data
3.9 Types of Communication

10
10
10
10
11
11
11
12
12
13

4 Data Exchange Mode
4.1 Acyclic Data Transmission with Profibus DPV1 Functionality
4.2 Cyclic Data Telegrams in Data Exchange Mode
4.3 Parameter Channel
4.3.1 PKE (parameter signature value)
4.3.2 PWE (process value)
4.3.3 Error code
4.3.4 Sequence Diagram
4.4 Process Data
4.4.1 Standard Telegrams
4.4.2 Configuration Data

14
14
15
16
16
17
17
18
19
19
20

5 I&M Identification & Maintenance Functions
5.1 I&M0

21
21

6 Block Model
6.1 Block types

22
22

7 Device Block
7.1 Information on the individual Indices7.1.1 Block Type ID (ID 16)
7.1.2 Device Type (ID 17)
7.1.3 Standard Revision Level (ID 18)
7.1.4 Device Manufacturer Identifier (ID 19)
7.1.5 Manufacturer Model Number (ID 20)
7.1.6 Software or Firmware Revision Level (ID 21)
7.1.7 Hardware Revision Level (ID 22)
7.1.8 Serial Number (ID 23)
7.1.9 Device Configuration (ID 24)
7.1.10 Device State (ID 25)
7.1.11 Exception Status (ID 26)
7.1.12 Exception Detail Alarm (ID 27)
7.1.13 Exception Detail Warning (ID 28)
7.1.14 Run hours (ID 36)
7.1.15 Basic Device Firmware Revision Level (ID 202)7.1.16 Common Exception Detail Alarm (ID 204)7.1.17 Device Exception Detail Alarm (ID 205)7.1.18 Manufacturer Exception Detail Alarm (ID 206)7.1.19 Common Exception Detail Warning (ID 207)7.1.20 Device Exception Detail Warning (ID 208 / ID 209)7.1.21 Manufacturer Exception Detail Warning (ID 210)
7.1.22 Address Switch (ID 211)7.1.23 Run hours x4 (ID 212)
7.2 Device Block Status diagram
7.2.1 General Device Block State descriptions
7.2.2 Device Block State Command (ID 15)

23
24
24
24
24
24
24
24
24
24
25
25
26
27
29
30
30
30
30
30
30
30
31
31
31
31
32
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8 Sensor Analog Input Function Blocks
8.1 Sensor Analog Input Function Block (CDG)
8.1.1 Analog Input Block Adjust Command (ID 15)
8.1.2 Block Type ID (ID 16)
8.1.3 Process Value (ID 19)
8.1.4 Status (ID 20)
8.1.5 Data Type (ID 21)
8.1.6 Data Unit (ID 22)
8.1.7 Reading Valid (ID 23)
8.1.8 Full Scale (ID 24)
8.1.9 Safe State (ID 39)
8.1.10 Safe Value (ID 40)
8.1.11 Auto Zero Enable (ID 41)
8.1.12 Overrange (ID 44)
8.1.13 Underrange (ID 45)
8.2 Sensor Analog Input Function Block (Pirani)
8.2.1 Analog Input Block Adjust Command (ID 15)
8.2.2 Block Type ID (ID 16)
8.2.3 Process Value (ID 19)
8.2.4 Status (ID 20)
8.2.5 Data Type (ID 21)
8.2.6 Data Unit (ID 22)
8.2.7 Reading Valid (ID 23)
8.2.8 Full Scale (ID 24)
8.2.9 Safe State (ID 39)
8.2.10 Safe Value (ID 40)
8.2.11 Overrange (ID 44)
8.2.12 Underrange (ID 45)
8.3 Sensor Analog Input Function Block (ATM)8.3.1 Analog Input Block Adjust Command (ID 15)
8.3.2 Block Type ID (ID 16)
8.3.3 Process Value (ID 19)
8.3.4 Status (ID 20)
8.3.5 Data Type (ID 21)
8.3.6 Data Unit (ID 22)
8.3.7 Reading Valid (ID 23)
8.3.8 Full Scale (ID 24)
8.3.9 Safe State (ID 39)
8.3.10 Safe Value (ID 40)
8.3.11 Overrange (ID 44)
8.3.12 Underrange (ID 45)

34
34
35
35
35
35
35
36
36
36
36
36
36
36
36
37
37
38
38
38
38
38
39
39
39
39
39
39
40
40
41
41
41
41
41
42
42
42
42
42
42

9 OneOfN Analog Input Function Block
9.1 Information on the Individual Indices9.1.1 Channel Instance Selector (ID 46)
9.1.2 OneOfN PV Selector (ID 47)

43
43
43
43

10 Discrete Output Function Block (Relay 1 and 2)
10.1 Information on the Individual Indices10.1.1 Block Type ID (ID 16)
10.1.2 Setpoint Value (ID 19)
10.1.3 Status (ID 20)
10.2 Discrete Output Function Block Behavior

44
44
44
44
44
45

11 Trip Point Function Block (Relay 1 and 2)
11.1 Trip Point Function Block behaviors
11.1.1 Setpoint function
11.1.2 Atmosphere detection
11.2 Trip Point Function Block (Relay 1 and Relay 2)
11.2.1 Block Type ID (ID 16)
11.2.2 High Trip Point (ID 17)
11.2.3 High Trip Enable (ID 18)
11.2.4 Low Trip Point (ID 19)
11.2.5 Low Trip Enable (ID 20)
11.2.6 Status (ID 21)
11.2.7 Discrete Output Function Block Instance (ID 26)
11.2.8 Data Units (ID 28)
11.2.9 Data Type (ID 29)
11.2.10High Trip Point Hysteresis (ID 31)
11.2.11
Low Trip Point Hysteresis (ID 32)
11.2.12
Factor of ATM (ID 201)11.2.13
Setpoint Mode (ID 202)

46
46
46
46
47
47
47
47
47
47
48
48
48
48
48
49
49
49
5

12 Transducer Blocks
12.1 CDG Transducer Block12.1.1 Block Type ID (ID 101)
12.1.2 StatusExtension (ID 102)12.1.3 Sensor Alarm (ID 103)12.1.4 Sensor Warning (ID 104)12.2 Pirani Transducer Block12.2.1 Block Type ID (ID 101)
12.2.2 StatusExtension (ID 102)12.2.3 Sensor Alarm (ID 103)12.2.4 Sensor Warning (ID 104)12.2.5 Pirani OFF (ID 201)12.3 ATM Transducer Block12.3.1 Block Type ID (ID 101)
12.3.2 StatusExtension (ID 102)12.3.3 Sensor Alarm (ID 103)12.3.4 Sensor Warning (ID 104)

50
50
50
50
50
50
51
51
51
51
51
51
52
52
52
52
52

13 OneOfN Vacuum Gauge Transducer Block13.1 Information on the Individual Indices13.1.1 OneOfN Status Extension (ID 120)

53
53
53

Appendix A: Definitions

54

Appendix B: Block Type57

Appendix C: Literature58

For cross-references within this document, the symbol (→  XY) is used, for crossreferences to further documents, listed under literature, the symbol (→
[Z]).

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1 Technical Data
Further technical data →Profibus interface

Fieldbus nameStandard applied
Communication protocol data format
Interface, physicalData rate
Node address
Local(Adjustable via hexadecimal"ADDRESS", "MSD", "LSD"switches)
Default setting
Via Profibus(hexadecimal "ADDRESS" switches
set to >7dhex (>125dec))
Profibus connection
Cable
Cable length, system wiring

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→

[5]

→
[5]
RS485
≤12 MBaud→[5]

00 … 7Dhex (0 … 125dec)
01hex

00 … 7Dhex (0 … 125dec)
D-Sub, 9-pin, female
shielded, special Profibus cable→  9 and[5]
according to Profibus specifications
→
[5]

7

≈65

Dimensions [mm]

67

BUS

ADDRESS

LSD

56

MSD

87.5

2 4 6 2 4 6
080
8ECA ECA

I/O
ST
DIA

SP2

SP1

DN 25 ISO-KF

46.3

42.7

36

21.5

ADJ

1/8" NPT

34

4 VCR

8 VCR

130.2

DN 16 CF-R long

DN 16 CF-F

30.9
130.8

31.5

7/16-20 UNF

DN 16 ISO-KF long

36.5

DN 16 ISO-KF

14.5

29.2×29.2 mm

24.4
4-VCR 90°8

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2 Interface Connection
Making a Profibus Interface
Cable

For operating the Pirani Standard (PSG55x) or Pirani Capacitance Diaphragm(PCG55x) Gauge via Profibus, an interface cable conforming to the Profibus
standard is required.
If no such cable is available, make one according to the following indications.

Cable type

Only a cable that is suited to Profibus operation may be used (→Proceduren Make the Profibus interface cable according to the following indications:
1

[5]).

5

D-Sub, 9-pin
male, soldering side
6

Pin 1
Pin 2
Pin 3
Pin 4
Pin 5
Pin 6

9

Do not connect
Do not connect
RxD/TxD-P
CNTR-P
DGND
VP

Pin 7
Pin 8
Pin 9

Not connected internally
RxD/TxD-N
Not connected internally

1)
2)
2)

1)

Only to be connected if an optical link module is used.

2)

Only required as line termination for devices at both ends of bus cable
(→
[5]).

Pin assignment of the D-Sub 15-pins sensor connector according to therespective operating manual (→[1], [2]).

o Plug the Profibus (and sensor) cable connector into the gauge.
Profibus cable

Sensor cablep Lock the Profibus (and sensor) cable connector.
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9

3 General Data

3.1 Introduction

Via the Profibus interface, the following and further data are exchanged in thestandardized Profibus protocol:•

Pressure reading•

Pressure unit (Torr, mbar, Pa)•

Zero / Gain adjustment•

Status and error messages•

Status of the switching functions

CautionCaution: data transmission errors
Any attempt to simultaneously operate the gauge via the RS232C
Serial Interface and a Fieldbus interface (DeviceNet or Profibus) or the
diagnostic port may result in incorrect data and data transmission
errors.
Therefore, it is inadmissible to simultaneously operate the gauge via
the RS232C Serial Interface and DeviceNet, Profibus, or the diagnostic port.

3.2 Operating Software

For operating the gauge via Profibus, prior installation of the PxG55x specific GSD
file is required on the bus master side. This file can be downloaded from our website (www.inficon.com).

3.3 Node Address

The node address is a unique device address on a Profibus network. The gauge
can only communicate with the network if its node address has been set properly.
The valid address range is 0 … 125 in decimal form.
In the PxG55x, the node address must be set in hexadecimal form (00 … 7Dhex).
Two rotary switches at the back of the gauge are used for this:ADDRESS
2 4 6 2 4 6
080
8ECA ECAMSD

LSD

The MSD switch is used to set the high-order address nibble
The LSD switch is used to set the low-order address nibble
The default node address setting is 01hex.
6
8
E

Example: Node address = 7Dhex:

MSD

C
LSD

The node address is polled by the firmware when the gauge is switched on. If thesetting deviates from the stored value, the new value is taken over into the
nonvolatile memory.
If a value >7Dhex (>125dec) is entered, the node address setting currently stored in
the device remains valid. However, the address can now be set via the Profibus
master with the "Set Slave Address" service.

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3.4 "NET" LED

THE "NET" LED indicates the network status of the PxG55x gauge:

LED

StatusOff

Device is off

RedError. The alarm bit in Exception Status is set (→  26).

Green/flashing

Device is ok and uses acyclic data traffic (→  14).

Green

Device is ok and uses cyclic data traffic (→  15).

3.5 Data Rate

The gauge supports all data rates defined in the IEC 61158 Type 3 / IEC 61784
standards (→[5]) up to 12 MBaud. Automatic data rate setting is supported.
Alternatively, a fixed data rate can be selected.

3.6 Ident Number

The ident number assigned to the gauge by the PNO (→tira56e1(2010-02)

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Gauge

Ident number (hexadecimal)

PxG55x0x0C85[4]) is:

11

S⇒M
x

2

x

3

x

x

x

4

x

x

x

x

x

x

2

8

x

x

x

2

9

x

x

x

x

x

2

10

x

x

x

x

x

202

x

2

203

x

x

x

2

204

x

x

x

206

205

Trip Relay 1-2

Channel Status

0x42,0x82,0x05,0x03x

7x

Process Value float

x

2

201

Configuration data

Process Value UINT16

OneOfN PV Selector

OneOfN Status Extension

Exception Status

ParamChannel

1

3.8 User Parameter Data

12

Depending on the standard telegrams used (→ section "Cyclic Message Telegrams"), the following configuration data have to be transmitted to the gauge during
the configuration phase:

M⇒S
ParamChannel

Standard
telegram
S⇒M

Standard
telegram
M⇒S

3.7 Configuration Data

0x42,0x84,0x05,0x08

x0x44,0x84,0x05,0x05, 0x05, 0x03
x

0x44,0x86,0x05,0x05, 0x05, 0x08x

0xC4,0x87,0x8A,0x0A,0x0A,0x05,0x03x0xC4,0x87,0x8C,0x0A,0x0A,0x05,0x08x0xC6,0x87,0x8C,0x0A,0x0A,0x05,0x05, 0x05, 0x03
x

x
x
x
x

0xC6,0x87,0x8E,0x0A,0x0A,0x05,0x05, 0x05, 0x08xx

0x44,0x85,0x05,0x03,0x05,0x0Axx0x44,0x87,0x05,0x08,0x05,0x0Axx

0xC6,0x87,0x8D,0x0A,0x0A,0x05,0x03,0x05,0x0Axx

0xC6,0x87,0x8F,0x0A,0x0A,0x05,0x08,0x05,0x0A
0xA1,0x91

Depending on the pressure unit setting (≙ data unit), the following configuration
string has to be transmitted to the gauge (parameter data in hexadecimal format):
Data string (hex)Pressure unit

00 00 00 10 01
00 00 00 13 01
00 00 00 13 08
00 00 00 13 09
00 00 00 00 00

COUNTS
Torr
mbar
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3.9 Types ofCommunication

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PxG55x works according to the Profibus DPV1 specification and can be addressedin cyclic or acyclic data traffic (→[5]).
Acyclic data traffic should be used to make device or process specific settings suchas definition of the Safe Values, Safe States etc. or for reading or writing of rarely
used attributes.
Cyclic data traffic is used for continuous exchange of the required process parameter values, i.e. pressure value and status indications. A number of standard
telegrams are available for cyclic data traffic. They can be selected according torequirements (→ section "Cyclic Message Telegrams").

13

4 Data Exchange Mode
4.1 Acyclic Data Transmission with Profibus
DPV1 Functionality

Block, slot andindex assignment
PCG55xThe reading and writing operations defined in Profibus are based on a slot index
address scheme. In PxG55x, all device functions are organized in the following
blocks:•Device block.
Describes all organizational parameters of the gauge (serial number, manufacturer, software version, …)•

OneOfN Analog Input Function Block.
Used to determine which function/transducer block parameter set is mapped
into the corresponding block address space.

•

Sensor Analog Input Function Block.
Describes the function of the pressure presentation.

•

OneOfN Vacuum Gauge Transducer Block•

Transducer Block.
Describes the physical interface between the gauge and the process.

•

Trip Point Function Block.
Used to model the action of the trip point relays.

•

Discrete Output Function Block.
Used to control the digital outputs (Trip Function Relays).

Each block is assigned to a separate slot as shown in the table below.
Slot ID

Block, if OneOfN Channel Instance … (→  43)… Selector = 1… Selector = 2… Selector = 3

0

Device Block1

OneOfN Analog Input Function Block
Analog Input Function Analog Input Function Analog Input Function
Block 1 (CDG)
Block 2 (Pirani)
Block 3 (ATM)OneOfN Vacuum Gauge Transducer Block
CDG Transducer
Block

PSG55x

Pirani Transducer
Block

ATM Transducer
Block

2

Trip Point Function Block 1

3

Trip Point Function Block 2

4Discrete Output Function Block 1

5Discrete Output Function Block 2

Slot ID

Block, if OneOfN Channel Instance … (→  43)… Selector = 1

0

Device Block1

OneOfN Analog Input Function Block
Analog Input Function Block (Pirani)
OneOfN Vacuum Gauge Transducer Block
Pirani Transducer Block2

Trip Point Function Block 1

3

Trip Point Function Block 2

4Discrete Output Function Block 1

5Discrete Output Function Block 2

There are 254 indices per slot. The indices can have a width of 255 bytes.
All values that can be accessed via Profibus have to be mirrored to one of theseslots/indices.
The parameters are generally numbered in ascending order, starting with index 16.
Services such as "Zero Adjust" are numbered in descending order, starting withindex 15.
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Assignment of the blockelements to the slot indices

Index

Parameter_n

Block_Type_Name
Attributes

Block_x

160

4.2 Cyclic Data Telegramsin Data Exchange Mode

Parameter_2
Parameter_1
Parameter_0
Operation_1
Operation_2
Operation_n
Slot x

PublicOperations Public

optional

optional
PrivateWithin the DataExchange mode the DP-master class 1 cyclically transmits andrequests data from all configured slaves in the network. This data transfer aims at
the fast propagation of measurement data and command data within the system.
The next two figures contain the input and output data of the Profibus device. The
data are divided between a parameter and a process data part.
The parameter data area contains a dedicated channel called parameter channel. It
allows the transmission of "single" cyclic requests by specifying an additional
protocol within the input and output data area. A concise description can be foundon page 16 "Parameter channel".
The process data contains the measurement and command data as described on
page 19 "Process data".

Input data

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The Input Area (DxIn) as sent in the DataExchange telegram (transmitted by the
PxG55x) consists of the 8 byte parameter channel (if there is a parameter channel
in the telegram) and up to 8 byte of process data. The actual amount of processdata is determined by the board configuration of the basic device.
Octets0…7

Octets
8…15

Parameter channel

Process data

The Output Area (DxOut) as received in the DataExchange telegram (transmitted
by the master) contains the 8 byte parameter channel and 8 control bytes in theprocess part of the telegram.
Octets0…7

Octets
8…15

Parameter channel

Process data15

4.3 Parameter Channel

The parameter channel was created as a means to transmit acyclic requests withina cyclic data stream. Within this section a brief introduction into the matter isprovided. The following table exhibits the principle structure of the parameter channel.
Octets2
3
4
IND res.

0
1
PKE

5
6
PWE

7

8

Octets910 11 12 13Standard telegram…

Parameter channel (PKW)
PKE
IND
res.
PWE
Standard telegram
PKW

=
=
=
=
=
=

parameter signature value
index within a slot
reserved
process value
cyclic telegram
parameter channel (PKE + IND + PWE)

The PKW allows a read and write access to the parameter space of the slave.
Within the PKW mechanism the master formulates an instruction. The slave processes the instruction and formulates the response.
Instructions and responses can’t be blocked: Exactly one instruction is transmitted
in one Output Telegram and exactly one response is transmitted in one Input Telegram. Therefore exactly 4 bytes of user data may be transmitted within one instruction or one response.
The instructions / responses are coded in the parameter signature word (PKE):

4.3.1 PKE (parametersignature value)

15

14

Where:

Instruction signature

13

12

11

10

AK

Bit position
9
8
7
6

res.
Bits

5

4

3

2

1

0

PNU (Parameter Number, Slot)

Meaning

15 … 12AK ≙ Instruction / response signature

11 … 8
7…0

reserveddefine the slot from which data are read or onto which avalue is to be written

In Master ⇒ Slave communication, the AK field contains the instruction signature of
the master.
In Slave ⇒ Master communication, the AK field contains the instruction signature of
the slave.
AK Function
Master ⇒ Slave(Instruction signature)AKnormalNo instruction

0

No response

1

Read parameter value

1

Transmit parameter value(word)
Transmit parameter value(double word)
Transmit parameter value(byte)

7 1)

11
2

Write parameter value(data type: word)

1

Transmit parameter value(word)

7 1)

3

Write parameter value(data type: double word)

2

Transmit parameter value(double word)

7 1)

11

Transmit parameter value(byte)

7 1)

10 Write parameter value(data type: byte)

16

AK
error

0

2

1)

Function
Slave ⇒ Master(Response signature)

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On the left of the table, the instruction signatures of the master are listed according
to their function. On the right of the table, the corresponding normal responses (AKNormal) and error codes (AK Error) transmitted by the slave are listed.

Instruction – responsesequence

1) The master transmits an instruction to the slave and repeats that instruction
until it receives a response from the slave.
2) The slave keeps transmitting the response to the instruction until the mastertransmits a new instruction.
3) The master marks the end of the first instruction cycle by setting AK to zero.
Only after that, a new instruction/response cycle may be started.

4.3.2 PWE (process value)

The PWE represents the data element to be transmitted. If a byte is to be transmitted, that byte has to be in position 8 of the parameter channel. Integers aretransmitted with bytes 7 and 8. Double integer and float values are transmitted withbytes 5 … 8.

4.3.3 Error code

The slave sends an error message on octet 7 and octet 8 (interpreted as INT16) incase a request cannot be fulfilled.

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Error code

Meaning

0
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16
17
18
19
20…100201
202

Undefined slot
Parameter not changeable
Lower or upper value range limit overflow
Subindex error
No arrayData type error
Setting not allowed (only resettable)
Description element not changeable
Reserved
Reserved
Access group error
No operation sovereignty
Password error
Text not readable in cyclic data transfer
Name not readable in cyclic data transfer
No text array existentReserved
Instruction not processable due to bad behavior state
Other errors
Data not readable in cyclic error
Reserved
Already in requested state
Object state conflict17

4.3.4 Sequence Diagram

The following sequence diagram contains an example parameter request by thecyclic DP master in order to illustrate the application of parameter channel.

DP-Master

PxG55xAK(IS) = 0
Parameter
Request(Client)

AK(RS) = 0
AK(IS) = 0

Parameter
Request(Server)

AK(RS) = 0
AK (IS) = 1
AK(RS) = 0
AK (IS) = 1

Fetch
Data

AK(RS) = 0
AK (IS) = 1
Store
Data

AK(RS) = 1
AK (IS) = 0
AK(RS) = 0
AK (IS) = 0
AK(RS) = 0

The master must mark the end of the instruction cycle by setting AK to zero. Only
after that, a new instruction/response cycle may be started.

18

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4.4 Process Data

4.4.1 Standard Telegrams

The structure of the process data part of the input and output data area depends
on the chosen message telegram. Applicable configurations are described below.
When selecting a message telegram, ascertain what output format of the measured
value (integer/float) is required and whether a parameter channel is needed or not.
The gauge can also be operated in such a way that the master does not transmit
any output data to the slave.

Standard
telegram

Master
⇔
Slave

Bytes

Meaning

2

M⇒S

0…7

Parameter Channel

1

S⇒M

0
1…2

Exception Status
Process Value UINT16

2

S⇒M

0
1…4

Exception Status
Process Value float

S⇒M

0
1
2
3…4

Exception Status
OneOfN Status Extension
OneOfN PV Selector
Process Value UINT16

S⇒M

0
1
2
3…6

Exception Status
OneOfN Status Extension
OneOfN PV Selector
Process Value float

S⇒M

0…7
8
9…10

Parameter Channel
Exception Status
Process Value UINT16

S⇒M

0…7
8
9…12

Parameter Channel
Exception Status
Process Value float

S⇒M

0…7
8
9
10
11…12

Parameter Channel
Exception Status
OneOfN Status Extension
OneOfN PV Selector
Process Value UINT16

S⇒M

0…7
8
9
10
11…14

Parameter Channel
Exception Status
OneOfN Status Extension
OneOfN PV Selector
Process Value float

S⇒M

0
1…2
3
4…5

Exception Status
Process Value UINT16
OneOfN Status Extension
Trip Relay 1-2

S⇒M

0
1…4
5
6…7

Exception Status
Process Value float
OneOfN Status Extension
Trip Relay 1-2

S⇒M

0…7
8
9…10
11
12…13

Parameter Channel
Exception Status
Process Value UINT16
OneOfN Status Extension
Trip Relay 1-2

3

4

7

8

9

10

201

202

203

(continued)

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19Standard Telegrams (concluded)Standard
telegram

204

205

1)

206

1)

Master
⇔
Slave

Bytes

Meaning

S⇒M

0…7
8
9…12
13
14…15

Parameter Channel
Exception Status
Process Value float
OneOfN Status Extension
Trip Relay 1-2

1

Status (Bit 4…7) 2) andMeasurement Value 2)
2)
Measurement Value

S⇒M
2
M⇒S

1…2

Two bytes are sent to the slave but are notprocessed by the slave

1)

Available in TTR compatibility mode only.

2)

Bit 7: 0 = no error / 1 = error
Bit 6: 0 = Trip Point 1 not activated / 1 = Trip Point 1 activatedBit 5: 0
Bit 4: 0
The measurement value is given as a 12-bit value. Byte 1 / Bit 3 represents the MSB,
Byte 2 / Bit 0 the LSB
Measurement_Value / 482 - 4.778

p [mbar] = 10
Measurement_Value / 482 - 4.9029
p [Torr] = 10
Measurement_Value / 482 - 2.778
p [Pa] = 10

4.4.2 Configuration Data

20

The devices support the following standard telegrams:
Standard
telegram
M⇒S

Standard
telegramS⇒M-

1

0x42,0x82,0x05,0x03-

20x42,0x84,0x05,0x08-

30x44,0x84,0x05,0x05, 0x05, 0x03

Configuration data-

40x44,0x86,0x05,0x05, 0x05, 0x08

27

0xC4,0x87,0x8A,0x0A,0x0A,0x05,0x03

2

8

0xC4,0x87,0x8C,0x0A,0x0A,0x05,0x08

2

9

0xC6,0x87,0x8C,0x0A,0x0A,0x05,0x05, 0x05, 0x03

210

0xC6,0x87,0x8E,0x0A,0x0A,0x05,0x05, 0x05, 0x08-

201

0x44,0x85,0x05,0x03,0x05,0x0A-

202

0x44,0x87,0x05,0x08,0x05,0x0A

2

203

0xC6,0x87,0x8D,0x0A,0x0A,0x05,0x03,0x05,0x0A

2

204

0xC6,0x87,0x8F,0x0A,0x0A,0x05,0x08,0x05,0x0A

206

205

0xA1,0x91

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5 I&M Identification & Maintenance Functions
5.1 I&M0

I&M is a concept for manufacturer- and sector-independent standardized identification of field devices. The field device provides specific information in an electronic nameplate, which can be primarily accessed online with initial operation andmaintenance.
The reading and writing is made on an I&M parameter block consisting of
64 octets. (→[4])
Content

OctetsCoding (H)

10

00H

MANUFACTURER_ID

20x017AH = INFICON

ORDER_ID

20

Ordering no.

SERIAL_NUMBER

16

Serial no.

HARDWARE_REVISION

2

Hardware revision 1)

SOFTWARE_REVISION

4

Software revision 1)

REVISION_COUNTER

2

Revision counter

PROFILE_ID

2

5A00H

PROFILE_SPECIFIC_TYPE

2

0000H

IM_VERSION

2

0101H

IM_SUPPORTED

2

0000H

HeaderManufacturer specific
I&M Block1)

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of the Profibus board

21

6 Block Model
Data to the PxG55x can be transmitted by means of a number of communication
protocols and corresponding masters. Profibus defines a master class 1 as normal
control unit of the slave (typically a PLC) and a master class 2 as configuration andservice unit. The following communication protocols are defined according to theProfibus DPV1 standard.
MS0
MS1
MS2

Cyclic data traffic between master class 1 and slave
Acyclic data traffic between master class 1 and slave
Acyclic data traffic between master class 2 and slave

In the PxG55x, all functions that are made available by the gauge via Profibus areorganized in blocks. Access to the individual parameters of the blocks is possible
via acyclic services or, for byte, integer and float values, also in cyclic data traffic
via the parameter channel.

6.1 Block types

The following block types are defined in the PxG55x gauge:
Device Block

The Device Block contains all data that are required for describing the device and handling its state (status of Device
State Machine). See chapter 7.

Function Block

Application specific values such as pressure values that result
from or can be calculated from the values of the transducer
block are represented in the function blocks.

Transducer Block22•

Analog Input Function Block (CDG).
→  34•

Analog Input Function Block (Pirani).
→  37•

Analog Input Function Block (ATM).
→  40•

OneOfN Analog Input Function Block.
→  43•Discrete Output Function Block (Relay 1 and Relay 2).
→  44•

Trip Point Function Block (Relay 1 and Relay 2).
→  46

The physical, process specific functions or interfaces between
the PxG55x and the process are represented in transducer
blocks.
The following transducer blocks are implemented:•

Capacitance Diaphragm Gauge (CDG) Transducer Block.
→  50•Heat Transfer Vacuum Gauge (Pirani) Transducer Block→  51•

Atmosphere Pressure Sensor (ATM) Transducer Block→  52•

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7 Device Block
The following table lists the services and parameters integrated in the Device
Block. → Appendix A for abbreviations

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ID

Name

Structure Data type

Bytes

Acces
s

Store

→

15

Device Block State

Simple

UINT8

1

1_R/W
2_R/W

N

33

16

Block Type ID

SimpleOSTRING(n)

4

1_R
2_R

N

24

17

Device Type

SimpleVSTRING(n)

8

2_R

N

24

18

Standard Revision Level

Simple19

Device Manufacturer
Identifier

SimpleVSTRING(n)

9

2_R

N

24

VSTRING(n)

20

2_R

N

24

20

Manufacturer
Model Number

SimpleVSTRING(n)

20

2_R

N

24

21

Software or Firmware
Revision Level (Profibus
Adapter)

SimpleVSTRING(n)

8

2_R

N

24

22

Hardware Revision Level(Profibus Adapter)

SimpleVSTRING(n)

8

2_R

N

24

23

Serial Number

SimpleVSTRING(n)

30

2_R

N

24

24

Device Configuration

SimpleVSTRING(n)

50

2_R

N

25

25

Device State

Simple

UINT8

1

0_XI
1_R
2_R

V

25

26

Exception Status

Simple

UINT8

1

0_XI
1_R
2_R

V

26

27

Exception Detail Alarm

Record→ below

-

1_R
2_R

V

27

28

Exception Detail
Warning

Record→ below

-

1_R
2_R

V

29

36

Run hours

SimpleUINT16

2

1_R
2_R

N

30

202 Basic Device Firmware
Revision Level

SimpleVSTRING(n)

8

2_R

N

30

204 Common Exception
Detail Alarm

Array

UINT8

2

1_R
2_R

V

30

205 Device Exception Detail
Alarm

Array

UINT8

4 (PCG)
2 (PSG)

1_R
2_R

V

30

206 Manufacturer Exception
Detail Alarm

Simple

UNIT8

1

1_R
2_R

V

30

207 Common Exception
Detail Warning

Array

UINT8

2

1_R
2_R

V

30

208 Device Exception Detail
Warning I

Array

UINT8

1

1_R
2_R

V

30

209 Device Exception Detail
Warning II

Array

UINT8

4 (PCG)
2 (PSG)

1_R
2_R

V

30

210 Manufacturer Exception
Detail Warning

Simple

UINT8

1

1_R
2_R

V

31

211 Address Switch

Simple

UINT8

1

1_R
2_R

V

31

212 Run hours (*4)

SimpleUINT32

4

1_R
2_R

N

31

23

7.1 Information on theindividual Indices7.1.1 Block Type ID (ID 16)

The Block Type ID Parameter contains an ID which describes the block type. The
block type ID of the "Device Block" is set to "1". The other defined block types arelisted in Appendix B.

7.1.2 Device Type (ID 17)

The Device Type parameter identifies the device type which is connected to thefield bus via Profibus.
The Device Type of the PSG55x gauge is "VPG" which is an acronym for "Vacuum
Pressure Gauge".
The Device Type of the PCG55x gauge is "CVG" which is an acronym for"Combination Vacuum Gauge".

7.1.3 Standard Revision Level(ID 18)This parameter describes the version of the "Sensor/Actuator Network Specific
Device Model" published by the SEMI® (Semiconductor Equipment and Materials
International, California), according to which the profile of this device has beendeveloped.
The fixed setting of this parameter is "E54-0997".

7.1.4 Device Manufacturer
Identifier (ID 19)

This parameter describes the manufacturer of the device. It is set to"INFICON AG".

7.1.5 Manufacturer Model
Number (ID 20)

This parameter provides the part number of the gauge. →  3 "Validity"

7.1.6 Software or Firmware
Revision Level (ID 21)

This describes the version of the Profibus firmware in the following format: xxyyzz(where 'xx' is the compatibility index, 'yy' is the actual version, 'zz' is the developing
version).

7.1.7 Hardware Revision Level(ID 22)This parameter describes the version of the Profibus adapter hardware in thefollowing format: xxyyzz (where 'xx' is the generic version, 'yy' is the actual version,'zz' is the developing version).

7.1.8 Serial Number (ID 23)

This parameter provides the serial number of the device.

24

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7.1.9 Device Configuration(ID 24)This parameter provides the current device configuration, e.g. " DS9 SP WO ATMPB CDG AO0 PIR".
The following abbreviations are used:
Abbreviation
DS9
FCC
HM
DS15HD
SP
PS
WO
NI
ATM
DIS
DN
PB
RS1
RS2
RS3
RS4
CDG
AO0
AO1
AO3
TTR21X
PIR
ION

7.1.10 Device State (ID 25)

Description
D-Sub connector 9-pin
FCC connector
Hirschmann connector
D-Sub connector 15-pin HD
Setpoints
Potential separation
Tungsten filament
Nickel filament
Atmosphere sensor
Display
DeviceNet
Profibus
RS485 protocol 1
RS485 protocol 2
RS485 protocol 3
RS485 protocol 4
Capacitance Diaphragm sensor
8.5 V analog out
10 V analog out
Special analog out
TTR21X compatibility
Heat Transfer (Pirani) vacuum sensor
Hot- / Cold-Ionization vacuum sensor

This parameter indicates the overall status of the gauge. Due to the structure of theDevice State Machine, the following states are possible:
Parameter value Status
0
1
2
3
4
5
6
7…50
51…99
100…255

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Undefined
Self testing
Idle
Self test exception
Executing
Abort
Critical fault
Reserved by PNO
Device-specific
Manufacturer-specific257.1.11 Exception Status (ID 26)

The Exception Status describes the alarm and warning states of the gauge in an"Extended error output format".
A difference is made between warnings and errors.
Alarms and errors are divided into three groups (→  27 "Exception Detail Alarm"and  29 "Exception Detail Warning" for details):•

ALARM / Warning Device Common•

ALARM / Warning Device Specific

For errors that occur independently of
the type of device used, e.g. supply
error, RAM, ROM, or EEPROM error.
For device specific errors.

•

ALARM / Warning Manufacturer
Specific

For errors defined by the manufacturer
that are not mentioned in the standard.

In each of the above groups, there are several error or warning conditions. The individual fields are presented in the "Exception Detail Alarm" and "Exception Detail
Warning". If an error message occurs in "Exception Detail Alarm" or "Exception
Detail Warning", the corresponding bit is set in the Exception Status. Therefore, if
bits 0…6 of the Exception Status are on "0" there is no warning message pending.
If a bit is set, the actual error can be read in the corresponding group.
The Exception Status is output in cyclic data and informs on the current error statususing only one byte. If an error occurs, the current error status can be read via
acyclic services or in cyclic data exchange via the parameter channel. This ensuresthat while the current error status is always available in the cyclic data, no
unnecessary data overhead is transmitted.
BitFunction

Meaning0

ALARM, device common

The bit is set if an error of the Alarm
Device Common group is detected.

1

ALARM, device specific

The bit is set if an error of the Alarm
Device Specific group is detected.

2

ALARM, manufacturer specific

The bit is set if an error of the Alarm
Manufacturer Specific group is detected.

3

26

–

–

4

WARNING, device common

The bit is set if an error of the Warning
Device Common group is detected.

5

WARNING, device specific

The bit is set if an error of the Warning
Device Specific group is detected.

6

WARNING, manufacturer
specific

The bit is set if an error of the Warning
Manufacturer Specific group is detected.

7

Expanded Format

Is constantly on "1" and marks the use of
the expanded error output format.

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7.1.12 Exception Detail Alarm(ID 27)

PCG55xIf one of the bits 0…2 is set in the Exception Status, the current error can be readin the "Exception Detail Alarm" parameter. Depending on the device configuration
specified by instrument-type the "Exception Detail Alarm" parameter consists of a
total of 8 or 10 bytes that inform on the error status of the gauge.
The parameter contains an array of 10 bytes, which are assigned as follows:
Byte NamenoDescription

Value

Common Exception Detail Alarm
2

0

Size

Number of subsequent bytes
used for description of the alarm(simple, UINT8, 1 byte)

1

Detail 0

Error message(simple, UINT8, 1 byte)→ table  28

2

Detail 1

Error message(simple, UINT8, 1 byte)→ table  28

Device Exception Detail Alarm
3

Size

4

Detail 0

5

Detail 1

6

Detail 2

7

Detail 3

Number of subsequent bytes
used for description of the alarm(simple, UINT8, 1 byte)

4

Error message(array, UINT8, 2 bytes)

Sensor Alarm (Inst. 1,
ID 103) of PCG55x
Transducer Block→  50Error message(array, UINT8, 2 bytes)

Sensor Alarm (Inst. 2,
ID 103) of PCG55x
Transducer Block→  50

Manufacturer Exception Detail Alarm

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8Size

Number of subsequent bytes
used for description of the alarm(simple, UINT8, 1 byte)

9

DetailError message(simple, UINT8, 1 byte)

1→ table  28

27

PSG55xThe parameter contains an array of 8 bytes, which are assigned as follows:
Byte NamenoDescription

Value

Common Exception Detail Alarm
2

0

Size

Number of subsequent bytes
used for description of the alarm(simple, UINT8, 1 byte)

1

Detail 0

Error message(simple, UINT8, 1 byte)→ table  28

2

Detail 1

Error message(simple, UINT8, 1 byte)→ table  28

Device Exception Detail Alarm
3

Size

4

Detail 0

5

Number of subsequent bytes
used for description of the alarm

Detail 1

2
Sensor Alarm (Inst. 1,
ID 103) of PSG55x
Transducer Block→  50Error message(array, UINT8, 2 bytes)

Manufacturer Exception Detail Alarm

Common Exception
Detail Alarm / Warning

Manufacturer Exception
Detail Alarm / Warning

28

1

6

Size

Number of subsequent bytes
used for description of the alarm(simple, UINT8, 1 byte)

7

DetailError message(simple, UINT8, 1 byte)

Bit

Common Exception Detail 00Internal diagnostic exception

0

0

1

Microprocessor exception

1

0

2

EPROM exception

2

0

3

EEPROM exception

3

0

4

RAM exception

40→ table  28

Bit

Common Exception Detail 1

5Communications exception

5

0

6

Internal real-time exception

6

0

7

0

7

0

Bit

Manufacturer Exception Detail0Internal communication
exception

1

Incompatible software

2

0

3

0

4

0

5

0

6

0

7

0

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7.1.13 Exception Detail
Warning (ID 28)

PCG55xIf one of bits 4…6 is set in the Exception Status, the current warning can be read in
the parameter "Exception Detail Warning". Depending on the device configuretion
specified by instrument-type the "Exception Detail Warning" parameter consists ofa total of 9 or 11 bytes that inform on the warning status of the gauge.
The parameter contains an array of 11 bytes, which are assigned as follows:
Byte NamenoDescription

Value

Common Exception Detail Warning
2

0

Size

Number of subsequent bytes
used for description the warning(simple, UINT8, 1 byte)

1

Detail 0

Error message(simple, UINT8, 1 byte)→ table  28

2

Detail 1

Error message(simple, UINT8, 1 byte)→ table  28

Device Exception Detail Warning
3

Size

Number of subsequent bytes
used for description the warning

4

OneOfN Status
Extension

Status extension(simple, UINT8, 1 byte)

5

Detail 0

6

Detail 1

7

Detail 2

8

Detail 3

5
Status extension(ID 102) of PCG55x
Transducer Block

Error message(array, UINT8, 2 bytes)

Sensor Warning(Inst. 1, ID 104) of
PCG55x Transducer
Block

Error message(array, UINT8, 2 bytes)

Sensor Warning(Inst. 2, ID 104) of
PCG55x Transducer
Block

Manufacturer Exception Detail Warning

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9Size

Number of subsequent bytes
used for description of thewarning(simple, UINT8, 1 byte)

10

DetailError message(simple, UINT8, 1 byte)

1→ table  28

29

PSG55xThe parameter contains an array of 9 bytes, which are assigned as follows:
Byte NamenoDescription

Value

Common Exception Detail Warning
2

0

Size

Number of subsequent bytes
used for description the warning(simple, UINT8, 1 byte)

1

Detail 0

Error message(simple, UINT8, 1 byte)→ table  28

2

Detail 1

Error message(simple, UINT8, 1 byte)→ table  28

Device Exception Detail Warning
3

Size

Number of subsequent bytes
used for description the warning

4

OneOfN Status
Extension

Status extension(simple, UINT8, 1 byte)

5

Detail 0

6

Detail 1

Error message(array, UINT8, 2 bytes)

3
Status extension(ID 102) of PSG55x
Transducer Block→  51
Sensor Warning(Inst. 1, ID 104) of
PSG55x TransducerBlock→  50

Manufacturer Exception Detail Warning
7

Size

Number of subsequent bytes
used for description of the alarm(simple, UINT8, 1 byte)

8

DetailError message(simple, UINT8, 1 byte)

1→ table  28

7.1.14 Run hours (ID 36)

This parameter identifies the number of hours that the basic device has been
powered ON. The parameter has a resolution of 1 hour.

7.1.15 Basic Device Firmware
Revision Level (ID 202)

This proprietary parameter describes the firmware version of the basic device in thefollowing format: xxyyzz (where 'xx' is the compatibility index, 'yy' is the actual
version, 'zz' is the developing version).

7.1.16 Common Exception
Detail Alarm (ID 204)

This proprietary parameter allows access of the corresponding part (Detail 0 and
Detail 1) of the Common Exception Detail Alarm parameter (ID 27) (→  27).

7.1.17 Device Exception Detail
Alarm (ID 205)

This proprietary parameter allows access of the corresponding part (Detail) of theDevice Exception Detail Alarm parameter (ID 27) (→  27).

7.1.18 Manufacturer Exception
Detail Alarm (ID 206)

This proprietary parameter allows access of the corresponding part (Detail) of the
Manufacturer Exception Detail Alarm parameter (ID 27) (→  27).

7.1.19 Common Exception
Detail Warning (ID 207)

This proprietary parameter allows access of the corresponding part (Detail 0 and
Detail 1) of the Common Exception Detail Warning parameter (ID 28) (→  29).

7.1.20 Device Exception Detail
Warning (ID 208 /ID 209)This proprietary parameter allows access of the corresponding part (Status Extension and Detail) of the Device Exception Detail Warning parameter (ID 28)(→  29).

30

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7.1.21 Manufacturer Exception
Detail Warning (ID 210)

This proprietary parameter allows access of the corresponding part (Detail) of the
Manufacturer Exception Detail Warning parameter (ID 28) (→  29).

7.1.22 Address Switch (ID 211)

This parameter is for testing purposes only. It holds the value (0...255) of the switch
position according to the labeling of the switch.

7.1.23 Run hours x4 (ID 212)

This parameter identifies the number of hours that the basic device has been
powered ON. The parameter has a resolution of 0.25 hours.

7.2 Device Block Status
diagram

The PxG55x behaves as described in the status diagram below.

After the start, the gauge independently runs through the INIT and SELFTESTING
status and eventually changes to the IDLE status (if there is no error) or to the
SELFTEST_EXCEPTION status (if there is a gauge error).
When data traffic is taken up, a difference has to be made between cyclic andacyclic data traffic.

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Cyclic data traffic

As soon as cyclic data interchange is taken up, the gauge automatically changes tothe EXECUTING status.

Acyclic data traffic

In acyclic data traffic, a START service has to be transmitted to bring the gauge tothe EXECUTING status.

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31

7.2.1 General Device Block
State descriptions

32

Status name

Description

NORMAL (State set)

The firmware of the device has started. All configured
block instances exist. No device internal initializationand check tasks have been carried out yet.

RUNNING (State set)This is the entry sub-state to NORMAL. All block instances are initialized. The parameters have appropriate initial or default values (as defined in this profile). Acyclic access to the device is possible(i.e. MS2 services and MS0 diagnosis service(get_diagnosis))

NOTEXECUTING(State set)This is the entry sub-state to RUNNING. Device is
not executing (e.g., it is not performing its devicespecific function). No self tests have been carried out
after a new start of the device.

SELFTESTING

This is the entry sub-state to NORMAL, RUNNING
and NOTEXECUTING. All block instances exist andhave been initialized. Device is performing devicespecific and device type-specific tests to determine if
it is qualified to be running.

IDLE

All blocks and device hardware and software havebeen initialized and have successfully completed self
testing. The device is ready for cyclic data transfer.

SELFTESTEXCEPTION

Object has detected an exception condition during
self testing. The details of the exception are stored in
the appropriate parameter values of the Device
Block.

EXECUTING

Device is executing (e.g., it is performing its devicespecific function) its functions according to the purpose of the device. The detailed purposes are described in the certain blocks of the profile. The device
performs cyclic data transfer.

ABORT

Device Block instance is in an aborted state. The device-specific functions are not performed properly. If
the reason of the abort is not active, the device state
can switch automatically back to IDLE state. The cyclic data transfer is not active.

CRITICALFAULTThe Device Block (and device) is in a fault state fromwhich there is no recovery. The result of the devicespecific function is bad. The conditions required forexit from a critical fault are outside the scope of thisdocument. The cyclic data transfer is not active.

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7.2.2 Device Block State
Command (ID 15)

There are a number of special commands for bringing the gauge into a status it
does not automatically go to.
The device block state method allows the master to force the behavior of the device block state machine (as shown in parameter device state) by setting it to oneof the values shown in the table below. Depending of the actual state, some values
may not be allowed at a time.
ID valuetira56e1(2010-02)

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Name

Description0

Inactive

No action.

1

Reset

Used for reinitializing the device.

2

Abort

Brings the device to the ABORT status.

3

Recover

Used for bringing the device from the ABORT
status into the Recovered State ≙ IDLE.

4

ExecuteBrings the unit to the EXECUTING status, inwhich the gauge functions normally. As soon as
cyclic data traffic is initialized, this status command is executed automatically.

5

Stop

Brings the gauge to the IDLE status.

6

Perform
Diagnostic

Stops the running activity and starts SELFTEST.

7…127

Reserved by
PNO

128

Factory Reset(Manufacturer
specific)

Used for reinitializing the device (Profibus interface and basic device) to the factory settings.

129

Reset
(Manufacturer
specific)

Used for reinitializing the device (Profibus interface and basic device).

130…255

Manufacturer
specific33

8 Sensor Analog Input Function Blocks
All gauge functions of the PxG55x are described in the Analog Input Function
Block. Depending on the device configuration there are up to 3 measuring systems
included.
Because the gauge includes three measuring systems, there are three Analog
Input Function Block Instances:

PCG55x•

Instance 1 represents the Capacitance Diaphragm Gauge (CDG) measuring
part of the gauge (→  34).

•

Instance 2 represents the Pirani measuring part of the gauge (→  37).

•

Instance 3 represents the Atmosphere Pressure Sensor (ATM) measuring partof the gauge (→  40).

Because the gauge includes only one measuring system, there is only one Analog
Input Function Block Instance:

PSG55x•8.1 Sensor Analog Input
Function Block(CDG)

Instance 1 represents the Pirani measuring part of the gauge (→  37).

This function block describes the functionality of the Capacitance Diaphragm
Gauge (CDG) measuring part of the gauge.
The PSG55x does not have a Capacitance Diaphragm Gauge (CDG)
and this function block (CDG) is not supported.
The following attributes are supported:

ID

Name

Structure

Data type

Bytes

Access

Store

→

15

AIBlockAdjust Command

Record

UINT8

2

1_R/W
2_R/W

N

35

16

Block Type ID

SimpleOSTRING(n
)

4

1_R
2_R

N

35

19

ProcessValue (PV)Simple

*)

–

0_XI
1_R
2_R

D

35

20

StatusSimple

UINT8

1

0_XI
1_R
2_R

D

35

21

Data Type

Simple

UINT8

1

2_R/W

N

35

22

Data Unit

SimpleUINT16

2

2_R/W

N

36

23

Reading Valid

SimpleBoolean

1

1_R
2_R

D

36

24

Full Scale

Simple

*)

–

1_R
2_R

N

36

39

Safe State

Simple

UINT8

1

1_R/W
2_R/W

N

36

40

Safe Value

Simple

*)

–

1_R/W
2_R/W

N

36

41

Auto Zero Enable

SimpleBoolean

1

1_R/W
2_R/W

N

36

44

Overrange

Simple

*)

–

1_R
2_R

N

36

45

Underrange

Simple

*)

–

1_R
2_R

N

36

*)

34

According to data type value (ID 21)

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8.1.1

Analog Input Block
Adjust Command(ID 15)
*)

Byte

Name

Structure

Data Type

Bytes

AccessStore

0

AdjustCommand

Simple

UINT8

1

1_R/W
2_R/W

N

1

Target Value

Simple

*)

1

1_R/W
2_R/W

N

According to data type value (ID 21)

Adjust Command0

Description

Zero Adjust Used to calibrate diaphragm zero pressure
value. A target value has not to been used.

1…255

Reserved

Target value

Description–

Zero adjust algorithm

Name

Reserved, no action

Not available

To perform the Zero Adjust pump down to a value 2 decades below the minimumpressure range of the gauge and then start the Zero Adjust Service.

8.1.2 Block Type ID (ID 16)

The Block Type ID Parameter contains an ID which describes the block type. The
block type ID of the "Sensor Analog Input Function Block" is set to "2". The otherdefined block types are listed in Appendix B.

8.1.3 Process Value (ID 19)

The process value contains the measurement value of the Diaphragm Gauge
transducer instance (CDG), transformed on the basis of the chosen data unit. If thedevice is not in state EXECUTING (ID 25, Device Block), the Process value is set
to the value specified by the Safe State (ID 39). This could be the Safe Value, Last
Value, Full Scale, Zero, device specific, or vendor specific.
Conversion between different Data Units:
p [mbar] = p [Torr] * 1.33322369
p [Torr] = p [mbar] / 1.33322369
p [Pa] = p [Torr] * 133.322369
Conversion between different Data Types:p [Counts] = 3511 * log (p [mbar] * 2 20) + 1
p [mbar] = 10 ((p [Counts] - 1) / 3511) / 2 20

8.1.4 Status (ID 20)

This parameter provides the Alarm and Warning State of this block instance.
Because Alarm and Warning Trip Points are not implemented, this value is always"0".

8.1.5 Data Type (ID 21)

This parameter determines the data type of ProcessValue and all relatedparameters. Two data types are supported: Float and Integer16.
This parameter can be changed via master class 2 acyclic data transfer only if thedevice is not in cyclic data transfer with master class 1. The data type is valid for all
block instances of the device. This means that all parameters determining the data
type will have the same value. A change of one data type parameter changes allothers to the same value.
It is possible to adjust the data type during cyclic data transfer start up (setting ofconfiguration data, CFG-String. In this case the data type value is updated with thevalue requested by the configuration data.
The data type can be changed from Float to Integer16. After startup it is set to thevalue stored in the EEPROM. The default setting is "Float".

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CodingData type

3
8

INT16
FLOAT (default)

35

8.1.6 Data Unit (ID 22)

The device supports the four data units described below:
Coding (hex)

Unit

1001
1301
1308
1309

COUNTS
Torr
mbar
PascalFor safety reasons, it is not possible to change the pressure unit while
the gauge is cyclically interchanging data with a DP/V0 master.
The data unit setting can only be modified when the gauge is in the IDLE
status.
In cyclic data traffic, the data unit must be set in the User Parameter
Data. All settings previously made in acyclic data traffic are overwritten.
→  12 "User Parameter Data"
If the data unit is set in one instance, that data unit setting applies to all
instances. Likewise, the data unit setting made in the User Parameter
Data is valid for all instances.

8.1.7 Reading Valid (ID 23)

This parameter indicates that the pressure reading is within a valid range. Thismeans that the following conditions are fulfilled:•

The gauge is in the EXECUTING status (Device Block, ID 25)•

The exception status contains no manufacturer warning or alarm•

The transducer block contains no sensor alarm (ID 103)
If this value is set to zero, the pressure reading is not valid. In such acase, either check Exception Status (ID 26, Device Block) to find out
whether there is an error or check the Status Extension (ID 102,
Transducer Block) to find out whether the measured value is out of thespecified measuring range (overrange or underrange mode).

8.1.8 Full Scale (ID 24)

This parameter contains the valid maximum measurement scale of the device interms of the currently selected data type (ID 21) and data unit (ID 22).

8.1.9 Safe State (ID 39)

When the gauge is not in the EXECUTING status (ID 25, Device Block) or if there
is a device error, a value defined by Safe State is output as pressure value. You
can select among the following Safe State values:
OptionCodingZero

0

ProcessValue (PV) behavior
The PV is set to 0.

Full Scale

1

The PV is set to the full scale value (ID 24).

Hold Last Value

2

The PV is set to the last valid value obtained in
the EXECUTING status.

Use Safe Value

3

The PV is set to the Safe Value (ID 40).

8.1.10 Safe Value (ID 40)

The Safe Value is the value output with the Process Value Parameter (ID 19) whenan error occurs or the gauge goes to the NOT EXECUTING status. If this value isset to zero, it will remain on zero when the data unit is changed.

8.1.11 Auto Zero Enable(ID 41)This parameter defines, if the CDG Zero pressure is automatically and periodicallycalibrated.

8.1.12 Overrange (ID 44)

This parameter contains the highest valid Process Value (PV) of the device interms of the currently selected data type (ID 21) and data unit (ID 22).

8.1.13 Underrange (ID 45)

This parameter contains the lowest valid Process Value (PV) of the device in termsof the currently selected data type (ID 21) and data unit (ID 22).

36

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8.2 Sensor Analog Input
Function Block(Pirani)This function block describes the functionality of the Pirani measuring part of thegauge.
The PSG55x does not have a Capacitance Diaphragm Gauge (CDG)
and therefore this function block will be implemented as Instance 1.
The following attributes are supported:

ID

Name

Structure

Data type

Bytes

Access

Store

→

15

AIBlockAdjust Command

Record

UINT8

2

1_R/W
2_R/W

N

37

16

Block Type ID

SimpleOSTRING(n)

4

1_R
2_R

N

38

19

ProcessValue (PV)Simple

*)

-

0_XI
1_R
2_R

D

38

20

StatusSimple

UINT8

1

0_XI
1_R
2_R

D

38

21

Data Type

Simple

UINT8

1

2_R/W

N

38

22

Data Unit

SimpleUINT16

2

2_R/W

N

38

23

Reading Valid

SimpleBoolean

1

1_R
2_R

D

39

24

Full Scale

Simple

*)

-

1_R
2_R

N

39

39

Safe State

Simple

UINT8

1

1_R/W
2_R/W

N

39

40

Safe Value

Simple

*)

-

1_R/W
2_R/W

N

39

44

Overrange

Simple

*)

-

1_R
2_R

N

39

45

Underrange

Simple

*)

-

1_R
2_R

N

39

*)

8.2.1

Analog Input Block
Adjust Command(ID 15)*)

According to data type value (ID 21)

Byte

Name

Structure

Data Type

Bytes

AccessStore

0

AdjustCommand

Simple

UINT8

1

1_R/W
2_R/W

N

1

Target Value

Simple

*)

1

1_R/W
2_R/W

N

According to data type value (ID 21)

Adjust Command

Description

0

Zero Adjust Used to calibrate pirani zero pressure value.
A target value has not to been used.

1

Gain Adjust Used to calibrate pirani fullscale pressure
value. A target value has not to been used.

2…255

Reserved

Target value

Description–

tira56e1

Name

Reserved, no action

Not available

Zero adjust algorithm

To perform the Zero Adjust pump down to a value 2 decades below the minimumpressure range of the gauge and then start the Zero Adjust Service.

Gain adjust algorithm

To perform the Gain Adjust vent to atmosphere and then start the Gain Adjust
Service.

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37

8.2.2 Block Type ID (ID 16)

The Block Type ID Parameter contains an ID which describes the block type. The
block type ID of the "Sensor Analog Input Function Block" is set to "2". The otherdefined block types are listed in Appendix B.

8.2.3 Process Value (ID 19)

The process value contains the measurement value of the Heat Transfer Vacuum
Gauge (Pirani) transducer instance, transformed on the basis of the chosen data
unit. If the device is not in state EXECUTING (ID 25, Device Block), the Process
value is set to the value specified by the Safe State (ID 39). This could be the Safe
Value, Last Value, Full Scale, Zero, device specific, or vendor specific.
Conversion between different Data Units:
p [mbar] = p [Torr] * 1.33322369
p [Torr] = p [mbar] / 1.33322369
p [Pa] = p [Torr] * 133.322369
Conversion between different Data Types:p [Counts] = 3511 * log (p [mbar] * 2 20) + 1
p [mbar] = 10 ((p [Counts] - 1) / 3511) / 2 20

8.2.4 Status (ID 20)

This parameter provides the Alarm and Warning State of this block instance.
Because Alarm and Warning Trip Points are not implemented, this value is always"0".

8.2.5 Data Type (ID 21)

This parameter determines the data type of ProcessValue and all relatedparameters. Two data types are supported: Float and Integer16.
This parameter can be changed via master class 2 acyclic data transfer only if thedevice is not in cyclic data transfer with master class 1. The data type is valid for all
block instances of the device. This means that all parameters determining the data
type will have the same value. A change of one data type parameter changes allothers to the same value.
It is possible to adjust the data type during cyclic data transfer start up (setting ofconfiguration data, CFG-String. In this case the data type value is updated with thevalue requested by the configuration data.
The data type can be changed from Float to Integer16. After startup it is set to thevalue stored in the EEPROM. The default setting is "Float".

8.2.6 Data Unit (ID 22)

CodingData type

3
8

INT16
FLOAT (default)

The device supports the four data units described below:
Coding (hex)

Unit

1001
1301
1308
1309

COUNTS
Torr
mbar
PascalFor safety reasons, it is not possible to change the pressure unit while
the gauge is cyclically interchanging data with a DP/V0 master.
The data unit setting can only be modified when the gauge is in the IDLE
status.
In cyclic data traffic, the data unit must be set in the User Parameter
Data. All settings previously made in acyclic data traffic are overwritten.
→  12 "User Parameter Data"
If the data unit is set in one instance, that data unit setting applies to all
instances. Likewise, the data unit setting made in the User Parameter
Data is valid for all instances.

38

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8.2.7 Reading Valid (ID 23)

This parameter indicates that the pressure reading is within a valid range. Thismeans that the following conditions are fulfilled:•

The gauge is in the EXECUTING status (Device Block, ID 25)•

The exception status contains no manufacturer warning or alarm•

The transducer block contains no sensor alarm (ID 103)
If this value is set to zero, the pressure reading is not valid. In such acase, either check Exception Status (ID 26, Device Block) to find out
whether there is an error or check the Status Extension (ID 102, Transducer Block) to find out whether the measured value is out of the specified measuring range (overrange or underrange mode).

8.2.8 Full Scale (ID 24)

This parameter contains the valid maximum measurement scale of the device interms of the currently selected data type (ID 21) and data unit (ID 22).

8.2.9 Safe State (ID 39)

When the gauge is not in the EXECUTING status (ID 25, Device Block) or if there
is a device error, a value defined by Safe State is output as pressure value. You
can select among the following Safe State values:
OptionCodingProcessValue (PV) behavior

Zero

0

The PV is set to 0.

Full Scale

1

The PV is set to the full scale value (ID 24).

Hold Last Value

2

The PV is set to the last valid value obtained in
the EXECUTING status.

Use Safe Value

3

The PV is set to the Safe Value (ID 40).

8.2.10 Safe Value (ID 40)

The Safe Value is the value output with the Process Value Parameter (ID 19) whenan error occurs or the gauge goes to the NOT EXECUTING status. If this value isset to zero, it will remain on zero when the data unit is changed.

8.2.11 Overrange (ID 44)

This parameter contains the highest valid Process Value (PV) of the device interms of the currently selected data type (ID 21) and data unit (ID 22).

8.2.12 Underrange (ID 45)

This parameter contains the lowest valid Process Value (PV) of the device in termsof the currently selected data type (ID 21) and data unit (ID 22).

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39

8.3 Sensor Analog Input
Function Block(ATM)This function block describes the functionality of the Atmosphere Pressure Sensor
measuring part of the gauge.
The PSG55x and some variants of the PCG55x do not have a Atmosphere Pressure Sensor (ATM) and this function block (ATM) is not supported.
The following attributes are supported:

ID

Name

Structure

Data type

Bytes

Access

Store

→

15

AIBlockAdjust Command

Record

UINT8

2

1_R/W
2_R/W

N

40

16

Block Type ID

SimpleOSTRING(n)

4

1_R
2_R

N

41

19

ProcessValue (PV)Simple

*)

-

0_XI
1_R
2_R

D

41

20

StatusSimple

UINT8

1

0_XI
1_R
2_R

D

41

21

Data Type

Simple

1

2_R/W

N

41

22

Data Unit

SimpleUINT16

2

2_R/W

N

41

23

Reading Valid

SimpleBoolean

1

1_R
2_R

D

42

24

Full Scale

Simple

*)

-

1_R
2_R

N

42

39

Safe State

Simple

UINT8

1

1_R/W
2_R/W

N

42

40

Safe Value

Simple

*)

-

1_R/W
2_R/W

N

42

44

Overrange

Simple

*)

-

1_R
2_R

N

42

45

Underrange

Simple

*)

-

1_R
2_R

N

42

*)

8.3.1

Analog Input Block
Adjust Command(ID 15)*)

According to data type value (ID 21)

Byte

Name

Structure

Data Type

Bytes

AccessStore

0

AdjustCommand

Simple

UINT8

1

1_R/W
2_R/W

N

1

Target Value

Simple

*)

1

1_R/W
2_R/W

N

According to data type value (ID 21)

Adjust Command

Name

0
2…255

Reserved

1

Target value
0…255

Gain adjust algorithm

40

Description
Reserved, no action

Gain Adjust If this service is performed, the ATM sensor
value will be set to the same value as at thattime measured by the diaphragm gauge.

Description
Not available

To perform the Gain Adjust vent to atmosphere and then start the Gain Adjust
Service.

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8.3.2 Block Type ID (ID 16)

The Block Type ID Parameter contains an ID which describes the block type. The
block type ID of the "Sensor Analog Input Function Block" is set to "2". The otherdefined block types are listed in Appendix B.

8.3.3 Process Value (ID 19)

The process value contains the measurement value of the Atmosphere Pressure
Sensor (ATM), transformed on the basis of the chosen data unit. If the device is notin state EXECUTING (ID 25, Device Block), the Process value is set to the value
specified by the Safe State (ID 39). This could be the Safe Value, Last Value, Full
Scale, Zero, device specific, or vendor specific.
Conversion between different Data Units:
p [mbar] = p [Torr] * 1.33322369
p [Torr] = p [mbar] / 1.33322369
p [Pa] = p [Torr] * 133.322369
Conversion between different Data Types:p [Counts] = p [mbar] * 2 4
p [mbar] = p [Counts] / 2 4

8.3.4 Status (ID 20)

The atmosphere pressure sensor cannot trigger alarms and warnings because theatmosphere pressure changes are to small. Therefore the ATM sensor supports noalarm/warning trip points and consequently this parameter is always set to "0".

8.3.5 Data Type (ID 21)

This parameter determines the data type of ProcessValue and all related parameters. Two data types are supported: Float and Integer16.
This parameter can be changed via master class 2 acyclic data transfer only if thedevice is not in cyclic data transfer with master class 1. The data type is valid for all
block instances of the device. This means that all parameters determining the data
type will have the same value. A change of one data type parameter changes allothers to the same value.
It is possible to adjust the data type during cyclic data transfer start up (setting ofconfiguration data, CFG-String. In this case the data type value is updated with thevalue requested by the configuration data.
The data type can be changed from Float to Integer16. After startup it is set to thevalue stored in the EEPROM. The default setting is "Float".

8.3.6 Data Unit (ID 22)

CodingData type

3
8

INT16
FLOAT (default)

The device supports the four data units described below:
Coding (hex)

Unit

1001
1301
1308
1309

COUNTS
Torr
mbar
PascalFor safety reasons, it is not possible to change the pressure unit while
the gauge is cyclically interchanging data with a DP/V0 master.
The data unit setting can only be modified when the gauge is in the IDLE
status.
In cyclic data traffic, the data unit must be set in the User Parameter
Data. All settings previously made in acyclic data traffic are overwritten.
→  12 "User Parameter Data"
If the data unit is set in one instance, that data unit setting applies to all
instances. Likewise, the data unit setting made in the User Parameter
Data is valid for all instances.

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41

8.3.7 Reading Valid (ID 23)

This parameter indicates that the pressure reading is within a valid range. Thismeans that the following conditions are fulfilled:•

The gauge is in the EXECUTING status (Device Block, ID 25)•

The exception status contains no manufacturer warning or alarm•

The transducer block contains no sensor alarm (ID 103)
If this value is set to zero, the pressure reading is not valid. In such acase, check the Status Extension (ID 102, Transducer Block) to find out
whether the measured value is out of the specified measuring range(overrange or underrange mode).

8.3.8 Full Scale (ID 24)

This parameter contains the valid maximum measurement scale of the device interms of the currently selected data type (ID 21) and data unit (ID 22).

8.3.9 Safe State (ID 39)

When the gauge is not in the EXECUTING status (ID 25, Device Block) or if there
is a device error, a value defined by Safe State is output as pressure value. You
can select among the following Safe State values:
OptionCodingZero
Full Scale
Hold Last Value

0
1
2

Use Safe Value

3

ProcessValue (PV) behavior
The PV is set to 0.
The PV is set to the full scale value (ID 24).
The PV is set to the last valid value obtained in
the EXECUTING status.
The PV is set to the Safe Value (ID 40).

8.3.10 Safe Value (ID 40)

The Safe Value is the value output with the Process Value Parameter (ID 19) whenan error occurs or the gauge goes to the NOT EXECUTING status. If this value isset to zero, it will remain on zero when the data unit is changed.

8.3.11 Overrange (ID 44)

This parameter contains the highest valid Process Value (PV) of the device interms of the currently selected data type (ID 21) and data unit (ID 22).

8.3.12 Underrange (ID 45)

This parameter contains the lowest valid Process Value (PV) of the device in termsof the currently selected data type (ID 21) and data unit (ID 22).

42

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9 OneOfN Analog Input Function Block
The figure below shows the basic design of the analog input function block.

The following attributes are supported:
ID

Name

Structure

Data type

Bytes

Access

Store

→

46

Channel InstanceSelector

Simple

UINT8

1

1_R/W
2_R/W

N

43

47

OneOfN PV Selector

Simple

UINT8

1

1_R
2_R

N

43

9.1 Information on the
Individual Indices9.1.1 Channel InstanceSelector (ID 46)

Provides access to the selected parameter instances via the function block parameter interface. The channel instance number starts with 1. The selector determines which function/transducer block parameter set is mapped into the "OneOfN
Analog Input Function Block" or "OneOfN Vacuum Gauge Transducer Block" address space.

9.1.2 OneOfN PV Selector(ID 47)

Selects the PV of the function block instance which will be provided to the masterclass 1 using the MS0 cyclic data exchange mechanism. The channel instancenumber starts with 1. The selector defines the Analog Sensor Function Block
Instance which Process Value is used as output using cyclic data exchange→  15).

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43

10 Discrete Output Function Block (Relay 1 and 2)
The Discrete Output Function Block is used for switching the relays on and off. The
following attributes are supported:
ID

Name

Data Type

Bytes

Store

→

16

Block Type ID

SimpleStructure

OSTRING(n)

1

1_R
2_R

AccessN

44

19

Setpoint Value

Simple

UINT8

1

0_XO
2_R

D

44

20

StatusSimpleBoolean

1

2_R

D

44

10.1 Information on the
Individual Indices10.1.1 Block Type ID (ID 16)

The Block Type ID Parameter contains an ID which describes the block type. The
block type ID of the "Discrete Output Function Block" is set to "7". The other defined block types are listed in Appendix B.

10.1.2 Setpoint Value (ID 19)

This parameter contains the value which is forwarded to the relay:

10.1.3 Status (ID 20)

44

Setpoint value

Relay

0
1
2…255

Off
On
Off

This parameter indicates the state of the Discrete Output Function Block Instance.
StatusDescription01

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10.2 Discrete Output
Function Block
Behavior

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The figure below shows the state chart of the discrete output function block.

State name

Description

Available

This is the initial state after power on. The Device Block isin Executing state (→  32).

Idle

This state cuts the signal flow between the SetpointValueof the certain Discrete Output function block instance andits dedicated underlying actuation hardware. The behavior
is according the IdleActionSelector parameter.

Ready

The connection between the SetpointValue parameter ofthe certain Discrete Output function block instance and its
dedicated underlying actuation hardware is recovered. The
instance is waiting for new SetpointValue parametervalues.

Run

The instance is working in its dedicated way.

Recoverable Fault

There is a temporary fault. The reason is device andmanufacturer specific.

Unrecoverable
Fault

There is a fault with no automatic return. This fault canforce a Critical Fault according to page 32 or refers to thecertain instance only.

ExecutingThis state is defined on page 32, i.e. the state machine isworking in this device state only.

45

11 Trip Point Function Block (Relay 1 and 2)
The Trip Point Object models the action of trip points for a device, often correspondding to physical outputs (Discrete Output Object). Each Trip Point channel has
a pointer (Analog Sensor Input Object Instance ID) to a source Analog Sensor
Input Instance.
A trip point value, designated as a High or Low Trip Point, is compared to the specified instance of an Analog Input Sensor Process Value parameter. This trip point
is intended to be used as a process control indicator only, as distinguished from theAnalog Input Sensor Function Block Object’s Alarm and Warning trip points.

11.1 Trip Point Function
Block behaviors

Two different functionalities are implemented: Setpoint function and Atmosphere(ATM) detection. The functionality of the trip points is set with the parameter"Setpoint Mode" (ID 202) (→  49).

11.1.1 Setpoint function

If "Low Trip Enable" (ID 20) is set, "Low Trip Point" is compared to the input value
to generate a trip point condition.
Status will be set if the input (ProcessValue) is at or below the "Low Trip Point". If
the pressure (input) increases above "Low Trip Point + Low Trip Point Hysteresis",the Status will be reset.
This behavior is similar at the "High Trip Point".
If "High Trip Enable" (ID 18) is set, "High Trip Point" is compared to the input value
to generate a trip point condition.
Status will be set if the input (ProcessValue) is at or above the "High Trip Point". If
the pressure (input) decreases below "High Trip Point - High Trip Point Hysteresis",the Status will be reset.

11.1.2 Atmosphere detection

This functionality is used to compare the pressure measured by the CDG with theatmospheric pressure.
The PSG55x and some variants of the PCG55x do not have an Atmosphere Pressure Sensor (ATM) and this function (Atmosphere detection)
is not supported.
The parameter "Percentage of ATM" (ID 201) is used to define a value "Percentage
of Atmosphere". This value will be multiplied with the pressure from the Analog
Sensor Instance x (ATM Sensor). Then this result will be copied into parameter"High Trip Point" or "Low Trip Point", depending on the value of parameter 202(Setpoint Mode).
Status has the same behavior as in the description of the "Setpoint function".

46

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11.2 Trip Point Function
Block (Relay 1 andRelay 2)

The following attributes are supported:

ID

Name

Structure

Data type

Bytes

AccessStore

16

Block Type ID

Simple→

OSTRING(n)

4

1_R
2_R

N

47

17

High Trip Point

SimpleAccording
Data Typevalue (ID 29)

-

1_R/W
2_R/W

N

47

18

High Trip Enable

SimpleBoolean

1

1_R/W
2_R/W

N

47

19

Low Trip Point

SimpleAccording
Data Typevalue (ID 29)

-

1_R/W
2_R/W

N

47

20

Low Trip Enable

SimpleBoolean

1

1_R/W
2_R/W

N

47

21

StatusSimple

UINT8

1

0_XI
1_R
2_R

D

48

26

Discrete Output
Function Block
Instance

Simple

UINT8

1

1_R
2_R

N

48

28

Data Units

SimpleUINT16

2

2_R/W

N

48

29

Data Type

Simple

UINT8

1

2_R/W

N

48

31

High Trip Point
Hysteresis

SimpleAccording
Data Typevalue (ID 29)

-

1_R/W
2_R/W

N

48

32

Low Trip Point
Hysteresis

SimpleAccording
Data Typevalue (ID 29)

-

1_R/W
2_R/W

N

49

201

Factor of ATM

Simple

FLOAT

4

1_R/W
2_R/W

N

49

202

Setpoint Mode

Simple

UINT8

1

1_R/W
2_R/W

N

49

11.2.1 Block Type ID (ID 16)

The Block Type ID Parameter contains an ID which describes the block type. The
block type ID of the "Trip Point Function Block" is set to "17". The other defined
block types are listed in Appendix B.

11.2.2 High Trip Point (ID 17)

This parameter defines the value at or above which a trip point condition will occur.

11.2.3 High Trip Enable (ID 18)

This parameter enables/disables the High Trip Point setting.
Parameter value

Description

0
1

disable High Trip Point setting
enable High Trip Point setting

11.2.4 Low Trip Point (ID 19)

This parameter defines the value at or below which a trip point condition will occur.

11.2.5 Low Trip Enable (ID 20)

This parameter enables/disables the Low Trip Point setting.

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Parameter value

Description

0
1

disable Low Trip Point setting
enable Low Trip Point setting

47

11.2.6 Status (ID 21)

This parameter contains the state of this object instance. The functionality is
described on page 46.
Parameter value
0111.2.7 Discrete Output
Function Block Instance(ID 26)

Description
Trip Point condition doesn't exist (unasserted)
Trip Point condition exists (asserted)

This parameter specifies the associated Discrete Output Object Instance.
ID

Meaning in the base unit

Instance 1
in Slot 2
Instance 1
in Slot 3

Relay 1
Trip Point Object Instance 1 in the base unit
Relay 2
Trip Point Object Instance 1 in the base unit

The instance is always one, because each Discrete Output Function Block (Slot 2
and Slot 3) has only one instance.

11.2.8 Data Units (ID 28)

This parameter defines the units of Trip Point, Hysteresis, etc. according to thefollowing table:
Parameter value (hex)

Unit

1001
1301
1308
1309

COUNTS
Torr
mbar
PascalFor safety reasons, it is not possible to change the pressure unit while
the gauge is cyclically interchanging data with a DP/V0 master.
The data unit setting can only be modified when the gauge is in the IDLE
status.
In cyclic data traffic, the data unit must be set in the User Parameter
Data. All settings previously made in acyclic data traffic are overwritten.
→  12 "User Parameter Data"
If the data unit is set in one instance, that data unit setting applies to all
instances. Likewise, the data unit setting made in the User Parameter
Data is valid for all instances.

11.2.9 Data Type (ID 29)

11.2.10 High Trip Point
Hysteresis (ID 31)

48

This parameter defines the data type of Trip Point, Hysteresis, etc. and all relatedparameters.
The parameter can be changed via master class 2 acyclic data transfer only if thedevice is not in cyclic data transfer with master class 1. The data type is valid for all
block instances of the device i.e. all parameter determining the data type shall havethe same value. A change of one data type parameter changes all otherparameters to the same value.
Parameter value

Type

3
8

INT16
FLOAT (default)

The High Trip Point Hysteresis value specifies the amount by which the Analog
Input Sensor ProcessValue must recover in order to clear a trip point condition.
For example: A High Trip Point of 100 and a High Trip Point Hysteresis value of 2
will result in a trip point condition being set when the (Analog Input Sensor)
ProcessValue goes at or above 100 and cleared when ProcessValue drops below
98.

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11.2.11 Low Trip Point
Hysteresis (ID 32)

The Low Trip Point Hysteresis value specifies the amount by which the Analog
Input Sensor ProcessValue must recover in order to clear a trip point condition.
For example: A Low Trip Point of 100 and a Low Trip Point Hysteresis value of 2
will result in a trip point condition being set when the (Analog Input Sensor)
ProcessValue falls at or below 100 and cleared when ProcessValue increases
above 102.

11.2.12 Factor of ATM (ID 201)

This value is only used for the calculation of Trip Point value in "ATM Mode".
The basic device multiplies this value with the pressure from the Atmosphere
Pressure sensor (Analog Sensor Instance x (ATM Sensor)) and copies the result
into the variable "High Trip Point" or "Low Trip Point", depending on the parameter"Setpoint Mode" (ID 202).

11.2.13 Setpoint Mode
(ID 202)

The following different modes are available:
Mode

Functionality Low Trip Point

Functionality High Trip Point0

Setpoint Mode:
Value settable by pushbutton andProfibus
ATM Mode:
Trip point value calculated by
Factor of ATM
Setpoint Mode:
Value settable by pushbutton andProfibus
Setpoint Mode:
Value settable only by Profibus

Setpoint Mode:
Value settable by pushbutton andProfibus
Setpoint Mode:
Value settable by pushbutton andProfibus
ATM Mode:
Trip point value calculated by
Factor of ATM
Setpoint Mode:
Value settable only by Profibus

1

2

4

If only one High Trip Point or Low Trip Point is enabled: Pushbutton
works on that Trip Point which is enabled.
If both High Trip Point and Low Trip Point are enabled: Pushbutton
works only on Low Trip Point

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49

12 Transducer Blocks

12.1 CDG Transducer Block
ID

Name

Structure Data type

Bytes Access

Store

→

101 Block TypeID

SimpleOSTRING(n)

4

1_R
2_R

N

50

102 Status
Extension

Simple

UINT8

1

1_R
2_R

V

50

103 Sensor
Alarm

Array

UINT8

2

1_R
2_R

V

50

104 Sensor
Warning

Array

UINT8

2

1_R
2_R

V

50

12.1.1 Block Type ID (ID 101)

The Block Type ID Parameter contains an ID which describes the block type. The
block type ID of the "CDG Transducer Block" is set to "14". The other defined block
types are listed in Appendix B.

12.1.2 StatusExtension(ID 102)

This bit mapped byte parameter provides the following additional information of the
PCG55x sensor (CDG):
Bit7

Bit6

Bit5

Bit4

Bit3

Bit2

Bit1

Bit0

Res.

Res.

Res.

Res.

Res.

Underrange
ExceededOverrange
Exceeded

Reading
InvalidRes. = Reserved

12.1.3 Sensor Alarm (ID 103)12.1.4 Sensor Warning (ID 104)

50•

Underrange ExceededThis bit is set ("1") if the ProcessValue PV is below the parameter Underrange(ID 45) of the CDG sensor instance (→  36].

•

Overrange ExceededThis bit is set ("1") if the ProcessValue PV is above the parameter Overrange(ID 44) of the CDG sensor instance (→  36).

•

Reading invalid
This bit represents the logical inversion of the parameter "Reading Valid"(ID 23) of the CDG sensor instance (→  36).

This parameter contains the following information:
Bit7

Bit6

Bit5

Bit4

Bit3

Bit2

Bit1

Bit0

Byte 0

0

0

0

0

0

0

0

SF

Byte 1

0

0

0

0

0

0

EF

0

•

SF = Sensor Element Failure•

EF = Electronics FailureThis byte is always "0". (The CDG Sensor does not produce any warnings)

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12.2 Pirani Transducer
Block

Name

Structure

Data type

Bytes

AccessStore→

101 Block Type ID

ID

SimpleOSTRING(n)

4

1_R
2_R

N

51

102 Status
Extension

Simple

UINT8

1

1_R
2_R

V

51

103 Sensor Alarm

Array

UINT8

2

1_R
2_R

V

51

104 Sensor
Warning

Array

UINT8

2

1_R
2_R

V

51

201 Pirani OFF

Simple

UINT8

1

1_R/W
2_R/W

N

51

12.2.1 Block Type ID (ID 101)

The Block Type ID Parameter contains an ID which describes the block type. The
block type ID of the "Pirani Transducer Block" is set to "13". The other defined
block types are listed in Appendix B.

12.2.2 StatusExtension(ID 102)

This bit mapped byte parameter provides the following additional information of the
PxG55x sensor (PIR):
Bit7

Bit6

Bit5

Bit4

Bit3

Bit2

Bit1

Bit0

Res.

Res.

Res.

Res.

Res.

Underrange
ExceededOverrange
Exceeded

Reading
InvalidRes. = Reserved

12.2.3 Sensor Alarm (ID 103)•

Underrange ExceededThis bit is set ("1") if the ProcessValue PV is below the parameter Underrange(ID 45) of the Pirani sensor instance (→  39).

•

Overrange ExceededThis bit is set ("1") if the ProcessValue PV is above the parameter Overrange(ID 44) of the Pirani sensor instance (→  39).

•

Reading invalid
This bit represents the logical inversion of the parameter "Reading Valid"(ID 23) of the Pirani sensor instance (→  39).

This parameter contains the following information:
Bit7

Bit6

Bit5

Bit4

Bit3

Bit2

Byte 0

0

0

0

0

0

Byte 1

0

0

0

0

0

•

SF = Sensor Element Failure•

EF = Electronics Failure

Bit1

Bit0

0

0

SF

0

EF

0

12.2.4 Sensor Warning (ID 104)

This byte is always "0". (The PIR Sensor does not produce any warnings)

12.2.5 Pirani OFF (ID 201)

This parameter is used to switch the Pirani off or on (by using an automatic or
manual mode) in case of special gases used in the process.
Parameter value

Description

0
1

Pirani is always on
Pirani switches off automatically(by default at pressures above 12 mbar - depends on thesystem configuration)
Pirani is always off2

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51

12.3 ATM Transducer BlockThis transducer block can only be accessed if the ATM sensor is part of the device
configuration (ID 24) (→  25).
ID

Name

Structure

Data type

Bytes

AccessStore→

101 Block Type ID

SimpleOSTRING(n
)

4

1_R
2_R

N

52

102 Status
Extension

Simple

UINT8

1

1_R
2_R

V

52

103 Sensor Alarm

Array

UINT8

2

1_R
2_R

V

52

104 Sensor Warning

Array

UINT8

2

1_R
2_R

V

52

12.3.1 Block Type ID (ID 101)

The Block Type ID Parameter contains an ID which describes the block type. The
block type ID of the "ATM Transducer Block" is set to "256". The other defined
block types are listed in Appendix B.

12.3.2 StatusExtension(ID 102)

This bit mapped byte parameter provides the following additional information of the
ATM sensor (ATM):
Bit7

Bit6

Bit5

Bit4

Bit3

Bit2

Bit1

Bit0

Res.

Res.

Res.

Res.

Res.

Underrange
ExceededOverrange
Exceeded

Reading
InvalidRes. = Reserved

12.3.3 Sensor Alarm (ID 103)12.3.4 Sensor Warning (ID 104)

52•

Underrange ExceededThis bit is set ("1") if the ProcessValue PV is below the parameter Underrange(ID 45) of the ATM sensor instance (→  42).

•Overrange ExceededThis bit is set ("1") if the ProcessValue PV is above the parameter Overrange(ID 44) of the ATM sensor instance (→  42).

•

Reading invalid
This bit represents the logical inversion of the parameter "Reading Valid"(ID 23) of the ATM sensor instance (→  42).

This parameter contains the following information:
Bit7

Bit6

Bit5

Bit4

Bit3

Bit2

Bit1

Bit0

Byte 0

0

0

0

0

0

0

0

SF

Byte 1

0

0

0

0

0

0

EF

0

•

SF = Sensor Element Failure•

EF = Electronics FailureThis byte is always "0". (The ATM Sensor does not produce any warnings).

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13 OneOfN Vacuum Gauge Transducer Block
The following attributes are supported:
ID

Name

Structure

Data type

Bytes

Access

Store

→

120

OneOfN Status
Extension

Simple

UINT8

1

1_R
2_R

V

53

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This parameter indicates whether the overrange or underrange of the gauge is
exceeded.
If the gauge is operated in its overrange or underrange, the corresponding bit andadditionally the bit "Reading Invalid" is set.
If an error occurs, the bit "Reading Invalid" as well as the corresponding error bitsin Device Block (ID 26, 27, 28) are set.
Bit7

Bit6

Bit5

Bit4

Bit3

Bit2

Bit1

Bit0

0

0

0

0

0

Underrange
exceededOverrange
exceeded

Reading
invalid53

Appendix A: Definitions
Data types

Abbreviation

Range
7

Data type
7

INT8-2 … (2 - 1)

Integer 1 byte

INT16-215 … (215 - 1)

Integer 2 byte

INT32-231 … (231 - 1)

Integer 4 byte

UINT8

0 … (28 - 1)

Unsigned integer 1 byte

UINT160 … (216 - 1)

Unsigned integer 2 byte

UINT320 … (231 - 1)

Unsigned integer 4 byte

FLOAT

38

±3.402×10

VSTRING(n)Visible string, ISO 646 and ISO 2375

OSTRING(n)BooleanDefinitions

Store characteristics

Data access

54

Floating point, IEEE 754 Short Real Number,
4 byteOctet string

0 ... 1

BooleanTerm

Meaning

Byte

Number of bytes used by a data structure (integer value)

Store

This parameter defines whether the values are stored in nonvolatile memory (→ store characteristics)

Default

Manufacturer-defined value

Abbreviation

Meaning

V"Volatile": Value is not saved to the NVRAM or EEPROM and islost in the event of a power failureN"Nonvolatile": Value is saved to the NVRAM or EEPROM and is
not lost in the event of a power failureD"Dynamic": Value may frequently change and do not need to bepersistentAbbreviation

Meaning

1_R/W
2_R/W
1/2_R/W

Acyclically readable and writeable by a Master Class 1
Acyclically readable and writeable by a Master Class 2
Acyclically readable and writeable by a Master Class 1 and 2

1_R
2_R
1/2_R

Acyclically readable by a master Class 1
Acyclically readable by a master Class 2
Acyclically readable by a master Class 1 and 2

1_W
2_W
1/2_W

Acyclically writeable by a master Class 1
Acyclically writeable by a master Class 2
Acyclically writeable by a master Class 1 and 2

0_XI

Cyclic output data with master Class 1

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Excerpts from:"PROFIBUS Profile for SEMI"→[4]

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The following table explains terms used in connection with the Profibus.
Term

Meaning

Alert Elements

Alert Elements are used to communicate notification messages from slave to master when warnings, alarms orevents are detected.

Application

A software functional unit consisting of an interconnected
aggregation of function blocks, events and objects, which
may be distributed and which may have interfaces withother applications.

Characteristic

A characteristic is a property or characteristic of an entity.
(Au) In block applications a block interface is defined by
input/output parameters. These parameters have characteristics called parameter characteristics. Examples areaccess rights and identification names.
(IT) The UML defines characteristics as a feature within aclassifier that describes a range of values that instances of
the classifier may hold. It is a property of a class instance(object).

Block(Block Instance)

A logical processing unit of software comprising an individual, named copy of the block and associated parametersspecified by a block type, which persists from one invocation of the block to the next. Concept similar to the class/
object approach, but well suited to the automation requirements.

Class(IT) A class represents a template for several objects anddescribes how these objects are structured internally. Objects of the same class have the same definition both fortheir operations and for their information structures.

Configuration (of asystem/device)

A step in system design: selecting functional units, assigning their locations and identifiers and defining their interconnections.

Data Structure

An aggregate whose elements need not be of the samedata type, and each of them is uniquely referenced by an
offset identifier.

Data TypeA data item with certain characteristics and permissible
operations on that data, e.g. INT8.

DeviceA physical entity capable of performing one or more specified functions in a particular context and delimited by its
interfaces.

Direction of Data

Input data are transmitted from the device to the bus. Output data are transmitted from the bus to the device.

Direction of Flow

A positive set point causes a flow from P to A.

EntityA particular thing, such as a person, place, process, object,
concept, association or event.

Function(1) A specific purpose of an entity.
(2) One of a group of actions performed by an entity.

Function Block

A named block consisting of one or more input, output andcontained parameters. Function blocks represent the basic
automation functions performed by an application which is
as independent as possible from the specifics of I/O devices
and the network. Each function block processes input
parameters according to a specified algorithm and an internal set of contained parameters. They produce output parameters that are available for use within the same function
block application or by other function block applications.

Function Block
Application

Application of an automation system performed by a Device
Block, Function Block, Transducer Block and accompanied
elements.

55

Excerpts from:"PROFIBUS Profile for SEMI"(cont.)

56

Term

Meaning

Instance

A set of data related to an invocation of a function block or aclass.

Internal Resolution(ir)

The internal resolution is 16383 (3FFFhex) for 100% and-16384 (C000hex) for -100% of the range.

Mode

Determines the block operating mode and available modes
for a block instance.

Object(IT) A software entity having identity, attributes and behavior.

Parameter

A variable that is given a constant value for a specified
application and that may denote the application.

Device BlockA Device Block is a named block. Hardware specific parameters of a field device, which are associated with a resource, are made visible through the Device Block. Similar
to transducer blocks, they insulate function blocks from thephysical hardware by a set of implementation independent
hardware parameters.

RecordA set of data items of different data types treated as a unit.

Resource

A resource is considered to be a logical subdivision within
the software (and possibly hardware) structure of a device.
Resources have independent control of their operation. The
definition of a resource may be modified without affecting
other resources within a device. A resource accepts andprocesses data and/or events from the process and/or
communication interfaces and returns data and/or events tothe process and/or communication interfaces, as specified
by the applications utilizing the resource. An interoperable
network view of applications is provided through device resources. Each resource specifies the network visible aspects of one or more local applications (or parts of distributed applications).

Simple Variable

A single variable which is characterized by a defined DataType.

Substitute Value

In case an optional parameter has not been implemented,
the device behaves according to the substitute value for thisparameter.

Transducer Block

Transducer Block is a named block. Transducer blocks
insulate function blocks from the specifics of I/O devices,such as sensors, actuators, and switches. Transducer
blocks control access to I/O devices through a device independent interface defined for use by function blocks.
Transducer blocks also perform functions, such as calibration and linearization, on I/O data to convert it to a device independent representation. Their interface to function
blocks is defined as one or more implementation independent I/O channels.

VariableA software entity that may assume any one of a set of values. The values of a variable are usually restricted to acertain data type.

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Appendix B: Block Type
Currently defined Block Types

Block Name

Block Type ID

Device Block1

Sensor Analog Input Function Block2

One of N Channel Sensor Analog Input Function Block

3

Multi Channel Sensor Analog Input Function Block4

Discrete Input Function Block

5

Actuation Analog Output Function Block

6

Discrete Output Function Block7

Analog Output Function Block

8

Single Stage Controller Function Block9

Gas Calibration Transducer Block10

Flow Transducer Block11

Sensor Analog Input Ambient Temperature Transducer Block

12

Heat Transfer Vacuum Gauge

13

Diaphragm Gauge

14

Cold Cathode Ion Gauge

15

Hot Cathode Ion Gauge

16

Trip Point Function Block17

OneOfN Vacuum Pressure Gauge Transducer Block

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18

Reserved

19 … 28 - 1

Manufacturer-specific

28 … 216 - 1

57

Appendix C: Literature

58

[1]

www.inficon.com
Operating Manual
PCG550, PCG552, PCG554
tina56d1 (German)
tina56e1 (English)
INFICON AG, LI–9496 Balzers, Liechtenstein[2]

www.inficon.com
Operating Manual
PSG550, PSG552, PSG554
tina60d1 (German)
tina60e1 (English)
INFICON AG, LI–9496 Balzers, Liechtenstein[3]

www.profibus.com
Profibus user organization[4]

www.profibus.com
Profibus profile guidelines
Part 1 - Identification & Maintenance Functions[5]

IEC 61158 Type 3 elements: Industrial communication networks –Fieldbus specifications
IEC 61784: Industrial communication networks – Fieldbus profiles

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Notestira56e1(2010-02)

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59Original: English tira56e1 (2010-02)

t i r a56e1

LI–9496 Balzers
LiechtensteinTel +423 / 388 3111
Fax +423 / 388 3700
reachus@inficon.com
www.inficon.com