PCG550, PCG552, PCG554
Pirani Capacitance Diaphragm Gauge
The INFICON Pirani Capacitance Diaphragm Gauge(PCG55x) combines the INFICON Pirani technology
with the advantages of a ceramic capacitancediaphragm sensor in a single product.
In the measurement range between 10 mbar andatmosphere the capacitance diaphragm technology
provides gas-type independent, highly accurate values
for reliable pressure measurement. The PCG55x offers
also a variety of features which allows the right productconfiguration for the demanded application.
ADVANTAGES• Gas-type independent above 10 mbar – allows safe venting with any gas mixture• High accuracy and reproducibility at atmosphere – for reliable atmospheric pressure detection• Fast atmospheric detection – eliminates waiting time and shortens process cycle• Measuring performance independent of mounting orientation for maximum engineering freedom in tool design• Available with tungsten (PCG550) or nickel (PCG552) filament or with a fully ceramic coated (PCG554) sensor
unit for highly corrosive applications• Easy to exchange plug and play sensor element with on-board calibration data – guarantees highreproducibility and low cost of ownership• Selectable output signal for easy integration• Optional atmospheric switch, display and digital interfaces e.g. EtherCAT®, DeviceNet™ etc.
• Latest EtherCAT® protocol generation 2.0• Diagnostic port on all versions• Compliance and standards: CE, EN, UL, CSA, RoHSAPPLICATIONS• Load lock control• For vacuum pressure measurement• Safety circuits in vacuum systems• General vacuum measurement and control in the medium and rough vacuum range

1

PCG550, PCG552, PCG554

PCG550, PCG552, PCG554
ORDERING INFORMATION

3 P C 1 – 0 0 1 – 1 1 0 1
Measurement range

Filament
Tungsten
NickelCeramic coatedTungsten, galv. isolated 1)
Nickel, galv. isolated 1)
Ceramic coated, galv. isolated 1)

12
367
80123

0.61 … 10.23 V 3)
1.2 … 8.68 V
0.375 … 5.659 V
1.57 … 9.05 V

Digital interface
012G-Unit 2)
mbar
TorrPamicron0123

None 3)
DeviceNet TM 4) 7)
Profibus DPTM 1) 7)
EtherCAT ® 1) 7) 9)
RS485 8)

Electrical connection
FlangeDN 16 ISO-KF
DN 16 ISO-KF long tube
DN 16 CF-F
DN 16 CF-R long tube
DN 25 ISO-KF
4 VCR female
8 VCR female
1/8 in. NPT
Surface mount 29 mm / 1.15 in.
4 VCR 90° female
7/16-20 UNF male

1)
2)
3)
4)
5)
6)
7)
8)
9)

2

12
4
5
6
DEFKM
N01243)

FCC, 8-pin
D-Sub, 9-pin
D-Sub, 15-pin HD
D-Sub, 15-pin HD, with RS485 5) 7)

Display, switching functions
01234567None
LCD display
2 setpoints (solid state)
ATM and 2 setpoints (solid state)
LCD display and 2 setpoints (solid state)
ATM and LCD display and 2 setpoints (solid state)
2 setpoints (mechanical) 6)
ATM and 2 setpoints (mechanical) 6)

Only with D-Sub 9-pin connector available
When selecting LCD (liquid crystal display) choose desired pressure unit
Choose these settings when using the INFICON VGC40x/PGD controllers or if selecting “4” under electricalconnections
Only with D-Sub 9-pin connector and galvanically isolated available
Only without additional digital interface available
Only with D-Sub 9-pin connector without LCD display available
Fieldbus options only available together with switching functions (select number “2”, “3”, “4”, or “5” from table“Display, switching functions”)
Just selectable via number “4” from table “Electrical connection
EtherCAT protocol generation 2.0; protocol generation 1.0 still available on request

PCG550, PCG552, PCG554

PCG550, PCG552, PCG554
Spare parts

PCG550Tungsten

PCG552
NickelPCG554
Ceramic coated

DN 16 ISO-KF
DN 16 ISO-KF long tube
DN 16 CF-F
DN 16 CF-R long tube
DN 25 ISO-KF
4 VCR female
8 VCR female
1/8 in. NPT
Surface mount 29 mm (1.15 in.)
4 VCR 90° female
7/16-20 UNF male357-925357-926357-927357-928357-929357-932357-931357-930357-934357-935357-933

357-936357-937357-938
357-939357-940357-943357-942357-941357-945357-946357-944357-947357-948357-949357-950357-951357-954357-953357-952357-956357-957357-955

Accessories

Part no.

Centering ring with filter (DN 16 ISO-KF)
Diagnostic: Communication adapter (2 m) for
PC RS232C serial port 1)

211-097
303-3331)

3

Diagnostic SW available upon request

PCG550, PCG552, PCG554

PCG550, PCG552, PCG554
SPECIFICATIONS
Type

PCG550Tungsten

Measurement range
Accuracy

PCG552
Nickel

5 × 10-5 … 1500 mbar (3.8 × 10-5 … 1125 Torr)

5 × 10-4 … 1 × 10-3 mbar (N2)±50% of reading

1 × 10-3 … 100 mbar (N2)±15% of reading

100 … 950 mbar

±5% of reading

950 … 1050 mbar
Repeatability±2.5% of reading

1 × 10-3 … 1100 mbar (N2)Admissible pressure (absolute)±2% of reading≤5 barPressure, max. (absolute)
Admissible temperature

10 barOperation (ambient)+10 … +50°C

Storage-20 … +65°C

Bakeout at flangeLong tube
Supply voltage≤80°C≤250°C+15 … +30 V / A (dc)Power consumption
Without fieldbus≤2.5 W

DeviceNet™

≤3 W

Profibus DP

≤3 W

®

EtherCAT
Output signal analog≤4.5 W

3PCx-0xx-xxx0

0 … +10.23 V

3PCx-0xx-xxx1

0 … +8.68 V

3PCx-0xx-xxx20 … +5.659 V

3PCx-0xx-xxx3Measuring range

0 … +9.05 V

3PCx-0xx-xxx0+0.61 … +10.23 V

3PCx-0xx-xxx1+1.2 … +8.68 V

3PCx-0xx-xxx2+0.375 … +5.659 V

3PCx-0xx-xxx3Voltage vs. pressure+1.57 … +9.05 V

3PCx-0xx-xxx01.286 V / Decade

3PCx-0xx-xxx1

1 V / Decade

3PCx-0xx-xxx2

1 V / Decade

3PCx-0xx-xxx3
Load impedance

1 V / Decade>10 kΩ

4

PCG550, PCG552, PCG554

PCG554
Ceramic coatedPCG550, PCG552, PCG554
TypePCG550
Tungsten

PCG552
Nickel

Setpoint relay

PCG554
Ceramic coated

22-5Range (N )5 × 10 … 1500 mbar

Relay contact

NO, potential freeHysteresis

10% of threshold

Contact rating
Solid state relays≤30 V / ≤0.3 A (dc)

Mechanical relays≤30 V / ≤1 A (dc)

Switching time
Interface (digital)
Electrical connection≤30 ms
RS232C

3PCx-0xx-x0xx

FCC, 8-pin

3PCx-0xx-x1xx

D-sub, 9-pin, male

3PCx-0xx-x2xx

D-sub, 15-pin HD, male

3PCx-0xx-x4xx
Cable length

D-sub, 15-pin HD with RS485, male≤100 m (≤330 ft)

RS232C operation
Materials exposed to vacuum

W, Ni, NiFe, Al2O3,SnAg, stainless steel,≤30 m (≤100 ft)
Ni, NiFe, Al2O3, SnAg,stainless steel, glass

Al2O3, stainless steel

glass
Internal volume
DN 16 ISO-KF

4.7 cm3

DN 16 ISO-KF long tube

14.5 cm3

DN 16 CF-F

8 cm3

DN 16 CF-R long tube

14 cm3

DN 25 ISO-KF, 4 VCR

5.5 cm3

8 VCR

7 cm3

1/8 in. NPT, 7/16-20 UNF

5.2 cm3

Surface mount 29 mm (1.15 in.)

4.9 cm3

4 VCR 90°
Weight7.9 cm3

Without fieldbus interface
With fieldbus interface
Degree of protection
Standards

5PCG550, PCG552, PCG554

115 … 130 g
230 … 250 gIP 40
EN 61000-6-2/-6-3, EN 61010, UL 61010-1, CSA 22.2 No. 61010-1

PCG550, PCG552, PCG554
SPECIFICATIONS INTERFACES
DeviceNet™
ProtocolData rate switch
Cable length

DeviceNet™, group 2 slave only
125, 250, 500 kBaud or network programmable

125 kbps

500 m (1650 ft.)

250 kbps

250 m (825 ft.)

500 kbps
MAC ID
Digital functions

100 m (330 ft.)
Two switches (address 00 – 63) or network programmable
Read pressure, select units: Torr, mbar, Pa
Degas function, Pirani full scale adjust
Monitor gauge status
Safe state allows definition of behavior in case of error

Analog functions
Visual communication indicators
Specification
Device typeI / O slave messaging
Setpoint relays

Detailed alarm and warning information
0 … 10 V analog output pressure indication
two setpoint relays A + B
LED network status (green / red)
LED module status (green / red)
DeviceNet™ “Vacuum Gauge Device Profile”“CG” for combination gauge
Polling only
2Range1 × 10-9 … 100 mbar

Relay contact

NO, potential freeHysteresis

10 % of reading

Contact rating
Supply voltage for DeviceNet™

60 V / 0.5 A (dc)
+11 - +25 V / 0.5 A (dc)

Supply voltage for gauge
Connector for DeviceNet™

+20 - +28 V / 0.8 A (dc)
Microstyle, 5-pin

Connector for Gauges (analog output,supply voltage, setpoints)

D-Sub, 15-pin, male

EtherCAT®
ProtocolCommunication standards
Process Data
EtherCAT connector
Cable
Cable length
Data rate

6

PCG550, PCG552, PCG554

EtherCAT®
Semiconductor Device Profile
ETG.5003 Part 1 Common Device Profile
ETG.5003 Part 2080 “Specific Device Profile - Vacuum Pressure Gauge"
Fixed PDO mapping and configurable PDO mapping
RJ45, 8-pin (socket), IN and OUT
Shielded Ethernet CAT5e or higher≤100 m (330 ft.)
100000 Kbps

PCG550, PCG552, PCG554
PROFIBUS DP
Baud rates

9.6 / 19.2 / 93.75 / 187.5 / 500 kBaude
1.5 / 12 MBaud
Two switches (address 00 - 127) or network programmable
Read pressure, select units: Torr, mbar, PaAddress
Digital functions

Degas function, Pirani full scale adjust
Monitor gauge status, filament status
Safe state allows definition of behavior in case of error
Analog functions

Detailed alarm and warning information
0 … 10 V analog output pressure indication

Setpoint relays

two setpoint relays A + B
2Range1 × 10-9 ... 100 mbar

Relay contact

NO, potential freeHysteresis

10 % of reading

Contact rating
Connector for Profibus DP≤30 V / ≤0.5 A (dc)
D-Sub, 9-pin, female

Connector for BPG (analog output,supply voltage, setpoints)

D-Sub, 15-pin, male

RS485CBaud rates
Address
Digital functions
Connector for RS485

7

PCG550, PCG552, PCG554

kBaud

9.6 / 19.2 / 38.4 /57.6
Two switches (address 00 – 255)
Read pressure, select units: Torr, mbar, Pa, micron, counts
monitor gauge status, detailed alarm and warning information,safe state allows definition of behavior in case of error
D-Sub, 15-pin HD, male

PCG550, PCG552, PCG554
DIMENSIONSmm (in.)

Standard
24 068MSD

Profibus

RATE STATUS
2 5 P
120P

BUS
46NET MOD

LSD

I/O

45 (1.77)

ST
DIA

SP22 4 6 2 4 608 08
E C A E C A
MSD

RS485

LA

LSD

LA

IN

I/O

ADDRESSSP1OUT

SP22MSD
62RATE
6 26E

A

E

LSD

A EST

A
ADJ

I/O

3 2 1 ONSTDIA

SP1SP2DIA

ST
DIA

SP1ADJ

SP2

ADJ

BUS

SP1
ADJ

65 (2.56)

D-Sub

www.inficon.com

Due to our continuing program of product improvements, specifications are subject to change without notice.
The trademarks mentioned in this document are held by the companies that produce them.
tiba40e1-g©2024

130.2 (5.13)

DN 16 CF-R long30.9(1.22)

reachus@inficon.com

DN 16 CF-F

4-VCR 90°
8 VCR

130.8 (5.15)

24.3(0.96)

DN 16 ISO-KF long

4 VCR

31.5(1.26)

46.3 (1.82)

29.2×29.2 mm

DN 16 ISO-KF

7/16-20 UNF

14.5 (0.57)

1/8" NPT

34(1.34)42.7 (1.68)

DN 25 ISO-KF

36.5(1.44)

36(1.42)21.5(0.85)

87.5 (3.44)

79.5 (3.13)

Micro-Style65 (2.56)

FCC

50 (1.97)

67 (2.64)

65 (2.56)

D-Sub

EtherCAT
2 4 6 2 4 6 2 4 6
ERR 0
8 0
8 0
8 RUN
A E
A E
A
E
x10x100x1

BUS

ADDRESS56 (2.20)

28(1.10)DeviceNet
ADDRESS