Operating Manual

Incl. EU Declaration of Conformity

Vacuum Gauge Controller
VGC083C

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Product Identification

In all communications with INFICON, please specify the information on the productnameplate:

ValidityThis document applies to products with part number 399-702.
The part number (PN) can be taken from the product nameplate.
We reserve the right to make technical changes without prior notice.

Important User Information

There are operational characteristic differences between solid state equipment andelectromechanical equipment. Because of these differences, and because there
are a variety of uses for solid state equipment, all persons that apply this equipment must take every precaution and satisfy themselves that the intended application of this equipment is safe and used in an acceptable manner.
In no event will INFICON be responsible or liable for indirect or consequential
damages that result from the use or application of this equipment.
Any examples or diagrams included in this manual are provided solely for illustrative purposes. Because of the many variables and requirements imposed on any
particular installation, INFICON cannot assume responsibility or liability for any
actual use based on the examples and diagrams.
No patent liability is assumed by INFICON with respect to use of information circuits, equipment, or software described in this manual.
Throughout this manual we use notes, notices and apply internationally recognizedsymbols and safety messages to make you aware of safety considerations.

Identifies information about practices or circumstances that can cause electrical or
physical hazards which, if precautions are not taken, could result in death orserious injury, property damage, or economic loss.

CAUTION
Identifies information about practices or circumstances that can cause electrical or
physical hazards which, if precautions are not taken, could result in minor ormoderate injury, property damage, or economic loss.

NOTICE
Identifies information that is critical for successful application and understanding of
the product.

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SHOCK HAZARD
Labels may be located on or inside the device to alert people that dangerous
voltages may be present.

Liability and Warranty

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INFICON assumes no liability and the warranty is rendered null and void if the enduser or third parties• disregard the information in this document• use the product in a non-conforming manner• make any kind of interventions (modifications, alterations etc.) on the product• use the product with accessories not listed in the corresponding product documentation.

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Contents

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Product Identification
Validity
Important User Information
Liability and Warranty

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1 Introduction / General Information
1.1 Description

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2 Technical Data
2.1 VGC083C
2.2 Power Supply for VGC083C (Optional)

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3 Important Safety Information
3.1 Safety Precautions - General
3.2 Safety Precautions - Service and Operation
3.3 Electrical Conditions
3.3.1 Proper Equipment Grounding
3.3.2 Electrical Interface and Control
3.4 Overpressure and use with hazardous gases
3.5 Gases other than Nitrogen / air

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4 Installation
4.1 Mechanical Installation - Controller
4.1.1 Panel Mount
4.1.2 Rack Mount
4.1.3 Mechanical Installation - Ionization Gauge
4.1.4 Mechanical Installation - Convection Gauge
4.2 Electrical Installation
4.2.1 Grounding
4.2.2 Installation
4.2.3 Connecting MAG050 / MAG060 - connector labeled "1"
4.2.4 Connecting the PGE050 - connectors labeled "2" and "3"4.2.5 Power Connection
4.2.6 Relay Connection
4.2.7 Analog Output Connection
4.2.8 Analog Input Connection (Capacitance Diaphragm Gauges, etc.)
4.2.9 Digital I/O Connection
4.2.10 RS232 / RS485 Serial Communications Connection

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5 Operation - IG and CG
5.1 IG Over Pressure Shut Down
5.2 Convection Gauge (CG) Initial Setup
5.3 Cond Cathode Activation Delay

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6 Setup and programming
6.1 Applying Power
6.2 Front Panel Display
6.3 User Interface Basics
6.4 Factory-Set Default Parameters
6.5 Programming
6.5.1 SETUP UNIT
6.5.2 ION GAUGE
6.5.3 CONVEC GAUGE
6.5.4 RELAYS
6.5.5 Analog Output
6.5.6 SERIAL COMM
6.5.7 DISPLAY

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7 Analog Output Charts & Equations (Nitrogen/Air Only)
7.1 Analog Output wide range measurement for IG - CG1 0.5 - 7V
(Nitrogen / Air only)
7.2 Analog Output for IG LOG N - 10 (Nitrogen / Air only)
7.3 Analog Output for IG LOG N - 11 (Nitrogen / Air only)
7.4 Analog Output for IG LOG N - 12 (Nitrogen / Air only)
7.5 Analog Output for IG 1.8 - 8.7 V (Nitrogen / Air only)
7.6 Analog Output for IG LINEAR (Nitrogen / Air only)
7.7 Analog Output for CG1 or CG2 1 - 8 V (Nitrogen / Air only)
7.8 Analog Output for CG1 or CG2 0 - 7 V (Nitrogen / Air only)
7.9 Analog Output for CG1 or CG2 NON - LIN (Nitrogen / Air only)
7.10
Analog Output for CG1 or CG2 LINEAR (Nitrogen / Air only)

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8 Using the Gauge with Different Gases
8.1 Ion Gauge Display Correction Factors for Selected Gases
8.2 Effects of Different Gases on Convection Gauge Display
8.3 Effects of Different Gases on Analog Output
8.3.1 Ion Gauge Analog Output Correction Factors for Selected Gases
8.3.2 IG - CG1 0.5 - 7V Analog Output Correction Factors for Selected Gases
8.3.2.1 IG-CG1 0.5 - 7V Analog Output Correction Factors Ion Gauge Range
8.3.2.2 IG-CG1 0.5 - 7V Analog Output Correction Factors Convection Gauge Range
8.3.3 Convection gauge analog output for selected gases
8.3.3.1 CG1 1 - 8 V or CG2 1 - 8 V Analog Output Correction Factors Convection Gauge
8.3.3.2 CG1 0 - 7 V or CG2 0 - 7 V Analog Output Correction Factors Convection Gauge
8.3.3.3 CG1 NON-LIN or CG2 NON-LIN Analog Output Correction Factors Convection Gauge

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9 Communication Protocol (Serial Interface)
9.1 Device Specific Serial Communication Info
9.2 INFICON RS232 / RS485 Command Protocol Summary
9.3 INFICON RS232 and RS485 Command Protocol Summary
9.4 RS232 GP 307 and 358 Protocol
9.5 RS485 GP 307 and 358 Protocol

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10 Service
10.1 Calibration
10.2 Maintenance10.3 Troubleshooting - Operation
10.4 Troubleshooting - Error Messages
10.5 Clearing Error Messages
10.6 Research Screen
10.6.1 Research Screen (Diagnostic Display)
10.7 Cleaning the VGC083C

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Repair70

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Accessories

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Storage71

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Disposal71

EU Declaration of Conformity

72

For cross-references within this document, the symbol (→  XY) is used; for crossreferences to further documents listed under ‘Literature’, use is made of the symbol(→  [Z]).

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51 Introduction / General Information
1.1 Description

The Vacuum Gauge Controller VGC083C is a vacuum pressure measurement
system which is comprised of the following:•

The VGC083C Vacuum Gauge Controller•

One INFICON MAG050 or MAG060 passive Cold Cathode Gauge head•

One or two INFICON PGE050 convection enhanced pirani heads•

Cables to interconnect the VGC083C and point-of-use devices

1)

The VGC083C will also operate the Granville-Phillips® Convectron® convection enhanced pirani
vacuum gauge head.

1)

Typical components of the complete vacuum measurement system are shown in
the figure below. The VGC083C provides power and operating control for theMAG050 / 060 hot ion gauge head (IG). Additionally, it provides power andoperating control for up to two enhanced convection gauges (CG).

Typical Components of thecomplete Vacuum Pressure
Measurement System
VGC083C Vacuum Gauge
Controller

MAG050 or MAG060
passive Cold Cathode Gauge
head

PGE050 Convection Gauges
1 & 2 (CVG 1 & 2)

The VGC083C, a controller unit capable of controlling multiple gauge heads, iseither rack or instrument panel mountable. Optional industry standard 19-inch, 2Uhigh rack-mount panels are available to mount the unit into rack enclosures. For
important information about the PGE050 convection gauge, MAG050 / MAG060
passive Cold Cathode Gauge heads please refer to the Operating Manual for eachof this products. Read the Operating Manuals in their entirety for any device you
intend to connect to the VGC083C prior to connecting and using the external
devices and cables that the VGC083C is intended to be used with.

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2 Technical Data

2.1 VGC083C
Measurement range

VGC083C
with MAG050 & PGE050
with MAG060 & PGE050
Units of measurement

Display

Pressure indication
Programming & set-up screen

Functionality

IG
CG

,

Alternate gauge

LED - 3 independent pressure display
channels, 3 digit plus 2 digit exponent perchannel
OLED - displays state of all setpoint relays, IG
emission current, error messages for fault
conditions

powers & operates one INFICON MAG050 or
MAG060 passive Cold Cathode Gauge
powers & operates up to 2 INFICON PGE050®
convection or Granville-Phillips (GP)®
Convectron
displays pressure from an alternate gauge suchas a Capacitance Diaphragm Gauge - CDG orother INFICON gauges using the analog input(external power source for these alternate
auxiliary devices will be required)

IG sensor control

IG sensor on/off can all be controlled via front panel soft-keys, remote input signals(digital I/O) or serial communications. IG sensor can also be automatically turned
on/off using measurements from one of the user selectable convection or alternate
gauges.

IG remote input signals(digital I/O)

IG sensor on/off can also be set by applying momentary continuity to ground. Also
the 9-pin D-sub remote input DIGITAL I/O connector provides pin-pin compatible
signals with the GP 358 controller as well as compatible signals with the GP 307.

Setpoint relays

NumberContact ratingtinb42e1-a-9

1.5×10 … 1000 Torr
-11
7.5×10 … 1000 Torr
Torr, mbar, Pa (user selectable)(2019-10)

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6single-pole, double-throw (SPDT), user assignable to any of the gauges
5 A at 30 V (dc), 5 A at 250 V (ac), resistive
load

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Analog output

IG analog output
Log-linear1)

0 … 10 V (dc), 1 V/decade, or
1.7 … 9.3 V (dc) (nominal 1.8 … 8.7 V (dc)),
0.8 V/decade2)
0 … 10 V (dc) (useable over 3 decades)

LinearCombination IG + CG or
IG + ALT analog
Log-linear
CG analog output
Log-linear

0.5 … 7 V (dc), 0.5 V/decade3)

1 … 8 V (dc), 1 V/decade , or3)
0 … 7 V (dc), 1 V/decade0 … 10 V (dc) (useable over 3 decades)
0.375 … 5.659 V (dc)LinearNon-linear analog S-curve
1)
2)
3)

Analog input

Various scaling selections also provide output compatibility with Granville-Phillips®
controller models 307, 350 and 358 controllers.
Also compatible with GP 307 controller.
Also compatible with GP 307, 350 and 358.

CDG

one 0 … 10 V (dc) analog input signal from a
CDG when used as an alternate gauge to CG2
analog input from one of the following gauges:
PGE300, PGE500, BAG302

INFICON

Serial communications

ProtocolStatus output

IG sensor on/off status displayed as pressure reading on the front panel, by serial
communications and by SPDT relay (DIGITAL I/O Connector) rated at 1 A at
30 V (dc) resistive, or 1 A at 30 V (ac) non-inductive.
IG error conditions are displayed on the front panel, by serial communications andby an open collector transistor output (ground emitter) rated at 40 V max. VCE,
50 mA IC max.

IG overpressure protection

Turns ion gauge off at 5.00 × 10 or overpressure value programmed by the user.

Ambience

Temperature
Operation
Storage
Relative humidity
AltitudeOperatingStorage

Housing8

RS485 / RS232 - ASCII protocol(command protocol compatibility with GP 307
and GP 358 controller is also provided)-3

Housing

0 … +40 °C–40 … +70 °C
0 … 95, non-condensing
max. 2500 m (8200 ft.)max. 12500 m (41000 ft.)aluminum extrusion

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Mains specifications

Voltage
Connectors
IG & CG
Digital I/O
Serial communications
RS232
RS485
analog I/O, setpoint relays,
power

Dimensions

mm (inch)

Weight0.7 kg (1.7 lb.)

2.2 Power Supply for
VGC083C (Optional)

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Connector
Power input
Power output
Compliance

20 … 28 V (dc), 12 W
protected against power reversal and transient
over-voltages
gauge cable assemblies provided by INFICON
9-pin D-sub male
9-pin D-sub female
9-pin D-sub malepluggable terminal block (mating connectors
included)2-pin pluggable terminal block to mate with the
VGC083C
100 … 240 V (ac), 50 … 60 Hz
24 V (dc), 2.5 A (60 W)
CE, RoHS, UL (US/Canada), CCC (China)

93 Important Safety Information
INFICON has designed and tested this product to provide safe and reliable service,provided it is installed and operated within the strict safety guidelines provided inthis manual. Please read and follow all warnings and instructions.

WARNINGTo avoid serious injury or death, follow the safety information in this document. Failure to comply with these safety procedures could result in serious
bodily harm, including death, and or property damage.
Failure to comply with these warnings violates the safety standards of installationand intended use of this instrument. INFICON disclaims all liability for the customer's failure to comply with these instructions.
Although every attempt has been made to consider most possible installations,
INFICON cannot anticipate every contingency that arises from various installations,operation, or maintenance of the instrument. If you have any questions about thesafe installation and use of this product, please contact INFICON.
This device meets FCC part 15 requirements for an unintentional radiator, class A.

3.1 Safety Precautions General

Hazardous voltages are present with this product during normal operation. The
product should never be operated with the covers removed unless equivalent protection of the operator from accidental contact with hazardous internal voltages isprovided.
WARNING! There are no operator serviceable parts or adjustments inside
the product enclosure. Refer servicing to service trained personnel.
Do not modify this product or substitute any parts without authorization of qualified
INFICON service trained personnel. Return the product to an INFICON qualified
service and repair center to ensure that all safety features are maintained. Do not
use this product if unauthorized modifications have been made.
WARNING! Source power must be removed from the product prior toperforming any servicing.
After servicing this product, ensure that all safety checks are made by a qualified
service person. When replacement parts are required, ensure that the parts are
specified by INFICON. Substitutions of non-qualified parts may result in fire, electric shock or other hazards. Use of unauthorized parts or modifications made to thisproduct will void the warranty.
To reduce the risk of fire or electric shock, do not expose this product to rain or
moisture. These products are not waterproof and careful attention must be paid to
not spill any type of liquid onto these products. Do not use these products if they
have been damaged. Immediately contact INFICON to arrange return of the product if it is damaged.
Due to the possibility of corrosion when used in certain environmental conditions, it
is possible that the product’s safety could be compromised over time. It is importantthat the product be periodically inspected for sound electrical connections andequipment grounding. Do not use if the equipment grounding or electrical insulation
has been compromised.

3.2 Safety Precautions Service and Operation

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Ensure the enclosure of the unit is connected directly to a good quality earth
ground.
Ensure that the vacuum port on which the vacuum gauge sensors are mounted iselectrically grounded.
Use a power source of 20 … 28 V (dc), 12 W or use INFIOCN series optional
power supplies.
Turn off power to the unit before attempting to service the controller.
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Turn off power to the unit if a cable or plug is damaged or the product is not operating normally according to this instruction manual. Contact qualified INFICON service personnel for any service or troubleshooting condition that may not be coveredby this operating manual.
It is important that the product be periodically inspected for sound electrical connections and equipment grounding. Do not use if the equipment grounding orelectrical insulation has been compromised.
Do not use if the unit has been dropped or the enclosure has been damaged.
Contact INFICON for return authorization and instructions for returning the productto INFICON for evaluation.
-3
If measured pressure exceeds 5.00 × 10 Torr or the value programmed in the“OVER PRESSURE” menu the sensor will turn off.

3.3 Electrical Conditions

3.3.1 Proper Equipment
Grounding

WARNING! When high voltage is present in any vacuum system, a life threatening electrical shock hazard may exist unless all exposed electrical conductors
are maintained at earth ground potential. This applies to all products that come incontact with the gas contained in vacuum chambers. An electrical discharge withina gaseous environment may couple dangerous high voltage directly to any ungrounded conductor of electricity. A person could be seriously injured or killed bycoming in contact with an exposed, ungrounded electrical conductor at high voltage potential. This condition applies to all products that may come in contact withthe gas inside the vacuum chamber (vacuum/pressure containment vessel).

WARNING! Hazardous voltages that could seriously injure or cause death arepresent in many vacuum processes. Verify that the vacuum connection ports on
which the ion gauge and the convection gauges are mounted are electricallygrounded. Consult a qualified Electrician if you are in doubt about your equipment
grounding. Proper grounding of your equipment is essential for safety as well as
intended operation of the equipment. The vacuum gauge heads and enclosure of
any control module must be connected directly to a good quality equipment
earthing conductor. Use a ground lug on the vacuum connection flange of thepressure measurement devices if necessary.
WARNING! In order to protect personnel from electric shock and bodily
harm, shield all conductors which are subject to potential high voltage electrical discharges in or around the vacuum system.

3.3.2 Electrical Interface andControl

3.4 Overpressure and use
with hazardous gases

It is the user’s responsibility to ensure that the electrical signals from this productand any connections made to external devices, for example, relays and solenoids,
are used in a safe manner. Always double check the system set-up before using
any signals to automate your process. Perform a hazardous operation analysis ofyour system design and ensure safeguards and personnel safety measures aretaken to prevent injury and property damage.

WARNING! Install suitable protective devices that will limit the level ofpressure inside your vacuum chamber to less than what the vacuum chambersystem components are capable of withstanding.
In cases where an equipment failure could cause a hazardous condition, always
implement fail-safe system operation. For example, use a pressure relief device inan automatic backfill operation where a malfunction could result in high internalpressures if the pressure relief device was not installed on the chamber.
The vacuum gauge heads used with this product are not intended for use atpressures above 20 psia (1000 Torr); DO NOT exceed 35 psig (< 2 ½ bars) pressure inside the sensor. The MAG050 / 060 passive cold cathode vacuum gauge
heads have an admissible pressure of 130 psi (9 bar absolute - limited to inert
gases <55 °C). If your chamber goes to higher pressures than what these heads
are rated for, you should install an isolation valve or pressure relief device to protect the gauge tube from overpressure conditions. With some fittings, actual safe
overpressure conditions may be lower; for example, a quick-connect, O-ring compression fitting may forcibly release the gauge tube from the vacuum chamber
fitting with only a few psi over local uncorrected barometric (atmospheric) pressure.

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CAUTION! If the internal pressure of a vacuum gauge device is allowed
to increase above local uncorrected barometric pressure (atmospheric pressure side), vacuum fittings may release and possible overpressure conditions
may cause leaks that would allow the gas inside the gauge tube to release
into the atmosphere of the surrounding environment. Toxic, pyrophoric andflammable gases are examples of hazardous gases that if allowed to leak outof the vacuum/pressure containment vessel into the atmospheric environment, could cause bodily injury and possible damage to equipment. Never
expose the gauge tube internal volume to pressure above local atmosphericpressure when using hazardous gases.

3.5 Gases other thanNitrogen / air

WARNING! Do not attempt to use with gases other than nitrogen (N2) or air
without referring to correction factor data tables.
INFICON gauges and modules are calibrated for direct readout of nitrogen or air.
Do not attempt to use with other gases such as argon (Ar) or carbon dioxide (CO2)
unless you have applied correction factors to both the displayed pressure and theanalog output to determine the true measured pressure. This is particularly criticalwhen using convection gauges to measure pressure of gases other than N2/Air.
WARNING! Do not use the PGE050 in an explosive atmosphere or in the presence of flammable gases, vapors or fumes. Do not use the PGE050 to measure
the pressure of explosive or combustible gases or gas mixtures. The sensor wire in
the gauge normally operates at 125 °C, but if malfunction should occur, the wire
temperature could exceed the ignition temperature of certain combustible gases
and gas mixture. This could cause an explosion which could result in serious injury
or death.

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4 Installation
4.1 Mechanical Installation Controller

The unit is intended for indoor use only. The unit is offered as a space saving half
rack design. It may also be used as a bench top device or easily installed in an
instrument panel. Optional EIA-standard rack mount panels are available for either
full rack or dual, side-by-side rack mount installation.

4.1.1 Panel Mount
Procedure Make a cutout in your rack panel or instrument control panel as shown inthe drawing below. Be sure to allow clearance behind the panel for the instrument as well as connectors and cables at the back of the instrument.
Optional EIA-standard, 19-inch, 2U height rack mount panels are available
from INFICON. The optional rack mount panels are provided with panel cutouts and mounting holes to allow efficient mounting of your VGC083C unit.

 Drill four guide holes on each side of the panel cut out (two on each side)with dimensions as shown in the panel cut-out drawing above.

 Slide the unit into the panel hole cut-out. Guide the four studs on the back of
the unit front panel face plate thru the four holes next to the panel cut-out.

 Use four # 10-32 Hex Nut (provided with instrument) to tighten the unit to
the panel.

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Optional EIA-standard 19-inch wide, 2U height rack mount panels available fromINFICON (→  70):13

Single cut-out panel

All dimensions in inches.

Single cut-out panel

All dimensions in inches.

The single cut-out and dual cut-out rack mountable panels shown above are available from INFICON. Panel color matches the front panel of VGC083C units. Screws
for mounting to rack enclosure are included.

4.1.3 Mechanical Installation Ionization Gauge

For more detailed information about the MAG050 / 060 cold cathodeionization gauge, please refer to the Operating Manual for this product.
CAUTION! Dirt and damage can impair the function of the vacuum component. Take appropriate measures to ensure cleanliness and prevent damage.
Touching the product or parts with bare hands increases the desorption rate.
Always use clean, lint free gloves as well as clean tools when working with thisproduct.
Mount the ionization gauge as close as possible to the pressure you want to measure. Long or restricted, small diameter tubing will create a pressure difference between your process chamber and the gauge. This may cause a delay in response topressure changes. Mounting the ionization gauge too close to a gas source inlet
may also cause measurement and control instability.
The gauge can be mounted in any orientation, however, if possible, mount thegauge with port down to help minimize the effect of any particles or condensationcollecting in the gauge.
Do not mount the gauge where it will be subjected to excessive vibration.
Vibrations may cause unstable readings, measurement errors and possible mechanical stress to components in the gauge.
For electrical safety purposes the housing of the gauge must be grounded to thevacuum chamber. When using KF flanges, metal clamps must be used to ensure
proper grounding. If the gauge may come into contact with charged particles(plasma, ion beam etc.), make sure its vacuum connections is galvanically connected to the vacuum chamber and do always use conductive metallic centeringrings and clamps. Do not attempt to modify your flange in order to use non-metallic-type flange clamps.

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Use all metal vacuum fittings with metal seals when operating pressures are ex-7-7-5pected to be below 1.00 × 10 Torr (1.33 × 10 mbar, 1.33 × 10 Pa).
Remove the protective lid and install the product to the vacuum system following
manufacturer's recommendations for different flanges and fittings. Keep the protective lid for future maintenance.

4.1.4 Mechanical Installation Convection Gauge

For more detailed information about the PEG050 convection gauge,
please refer to the Operating Manual for this product.
Mount the PGE050 as close as possible to the pressure you want to measure.
Long or restricted, small diameter tubing will create a pressure difference between
your process chamber and the gauge. This may cause a delay in response topressure changes.
Mounting the PGE050 too close to a gas source inlet may also cause
measurement and control instability. Do not mount the PGE050 near a source ofheating or cooling, such as heaters or air conditioning vents.
Mount the PGE050 with its main axis horizontal (see diagram below). Pressure
reading errors may occur above 1 Torr if the unit is not mounted horizontally. Below
1 Torr, mounting position has little to no effect.

Mount the PGE050 with port down, if possible, to help minimize the effect of any
particles or condensation from collecting in the gauge.
Do not mount the PGE050 where it will be subjected to excessive vibration. Vibrations may cause unstable readings, measurement errors and possible mechanicalstress to components in the PGE050.
Flanges/ Fittings - follow the manufacturer's recommendations and note thefollowing:- NPT fittings: When connecting the device using a NPT fitting, apply a thread sealant compound or wrap the threaded portion of the tubing with one-and-a-half to two®
wraps of pipe thread seal tape such as PTFE (Teflon ) tape and hand tighten thegauge into the gauge port. Do not use a wrench or other tool which may damage
the gauge.

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4.2 Electrical Installation
4.2.1 Grounding

4.2.2 Installation

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Be sure the vacuum gauges and the rest of your vacuum system are properly
grounded to protect personnel from shock and injury. Be aware that some vacuum
fittings, especially those with O-rings when not used with metal clamps, may not
produce a good electrical connection between the gauge and the chamber it isconnected to. Use a ground lug on the vacuum connection flange of the pressure
measurement device if necessary. The VGC083C control unit should be connectedto earth ground via a good quality equipment earthing conductor. It is encouraged
that you connect a separate 12-AWG earthing conductor between a known facility
earth ground connection and the location marked with the earth ground symbol (via
the green colored screw provided) on the back panel of the VGC083C.

A good, recommended practice is to remove power from any cable prior to connecting or disconnecting it. The electrical connections for the VGC083C are locatedon the back panel of the device as shown below.

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4.2.3 Connecting MAG050 /MAG060 - connector
labeled "1"

CAUTION! It is always good industry practice to turn off power to the instrument before connecting or disconnecting cables.
The custom cable / connector assembly are custom cable assemblies provided indifferent lengths from INFICON for connecting the VGC083C to the MAG050 / 060
cold cathode ionization gauge sensor.
Changing cables from one device to another when power is applied is not only badelectronics handling procedure, it is not advised and, if done by the user of thisequipment, may lead to erroneous measurement results, a hazardous situation,equipment damage and possible operator injury.
Part numbers →  70.
MAG050 / MAG060 IG
80 °C

MAG050 / MAG060 IG
bakable cable 250 °C

4.2.4 Connecting the PGE050 connectors labeled "2"and "3"

PN 399-580 … -582 are a custom cable assemblies provided in different lengths
from INFICON for connecting the VGC083C to INFICON PGE050 gauge or MKS®
®
Instruments / Granville-Phillips 275 Convectron vacuum gauge sensor. Connect
the DE-9 D-subminiature connector to VGC083C and PGE050 connectors to "2" or"3".
For your reference, the wiring chart for the PGE050 cable provided by INFICON isshown below. In addition to INFICON provided standard cable assembly lengths,
INFICON will provide custom length cable assemblies upon request.

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VGC083C
pin no.

connects to

PGE050 gauge pin no.
(INFICON molded, custom connector)

1

⇒

n.c.

2

⇒

cable shield

3

⇒

3

4

⇒

3

5

⇒

2

6

⇒

5

7

⇒

1

8

⇒

1

9

⇒

n.c.

17

4.2.5 Power Connection

4.2.6 Relay Connection

The VGC083C requires an input power of 20 … 28 V (dc), 12 W to operate. One
each 2-contact pluggable terminal strip mating connector is provided for connection
to the power contactors. Optional power supplies are also available from INFICON(PN →  70).
Power
(contacts)

Contact Description+–

Power input (20 … 28 V (dc), 12 W)
Power groundA total of six setpoint relays are provided by the VGC083C. Two each 9-contact
pluggable terminal strip mating connectors are provided for easy connection to therelay contactors. The VGC083C back panel relay connectors are marked RLY1
thru RLY6. Each relay has a contact labeled = (Normally Open), ≠ (Normally
Closed) and I (common).
RLY1 thru RLY6
(contacts)

Contact Description=

Relay #1 to Relay #6(NORMALY OPEN)
Relay #1 to Relay #6(NORMALLY CLOSED)
Relay #1 to Relay #6 (COMMON)≠I

4.2.7 Analog Output
Connection

4.2.8 Analog Input Connection(Capacitance Diaphragm
Gauges, etc.)

18

Power Input
Connector

Relay Connectors

A total of three analog outputs are provided by the VGC083C. These output voltage signals are proportional to the displayed pressure for any of the user assigned
vacuum gauges. Three each 2-contact pluggable terminal strip mating connectors
are provided for connection to the analog output contactors. The VGC083C backpanel analog output connectors are marked AO1, AO2 and AO3. Each connector
has a contact labeled + (analog output signal) and – (analog output ground).
AO1 , AO2, AO3(contacts)

Contact Description+–

Analog Output #1 to #3 (Signal)
Analog Output Ground #1 to #3(Signal Return)

Analog Output
Connectors

One analog input is provided by the VGC083C for using as an alternate gauge to"2". This input can be accepted from one capacitance diaphragm gauge or other
INFICON vacuum module series PGE300, PGE500 or BAG302. One each 3-contact mating pluggable terminal strip connector is provided for connection to theanalog input contactor. The VGC083C back panel analog input connector ismarked A1. Each connector has a contact labeled + (analog input signal) and –(analog input ground) and D (power detect).
A1(contacts)

Contact Description+–
D

Analog Input (Signal)
Analog Input Ground (Signal Return)Detect (power detect)

Analog Input
Connector

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When using a capacitance manometer / diaphragm gauge or INFICON modules
such as the PGE300, PGE500, BAG302 as an ALTERNATE GAUGE, the gaugemust be connected to the VGC083C as shown below. The alternate gauge must be
provided power from an auxiliary power supply capable of providing the power required by the alternate gauge connected to the VGC083C. The D contact is used inthis configuration to protect the IG from being turned on at high pressure in casepower to the alternate gauge is lost.

4.2.9 Digital I/O Connection

Signal Type A - Control Input
Signals

The IG can be controlled manually using the front panel soft-keys, via remote input
signals using the digital I/O connector or RS232/RS485 commands. The VCG083C
can also be configured so that the IG sensor on/off is controlled by using thepressure measurements from CG1 , CG2 or the alternate gauge. If the user
prefers digital I/O as the means of controlling the IG , various control input andstatus output signals are available from the 9-pin D-sub male DIGITAL I/O connector. The DIGITAL I/O Connector also provides pin-pin compatible signals with
the GP 358 vacuum gauge controller as well as compatible signals with the
GP 307.
The DIGITAL I/O Connector provides three different types of signals as listed
below:The IG sensor on/off can be set by applying momentary continuity to ground.
This requires a momentary ground of less than 0.4 V (dc) at 10 µA for 25 msec
(minimum) be applied. After this, the input must be allowed to float higher than
3.5 V (dc) for 105 msec (minimum) before another low can be applied.
Input signal: Apply momentary continuity to ground to turn IG

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sensor on or off

Signal Type B - Status Output
SignalThe IG on/off status relay is also available as both normally open and normallyclosed to indicate IG is on or off. This is an output signal to other external instruments to confirm IG filament is on or off. The IG on / off status relay is a single
pole, double-throw (SPDT) relay rated at 1.0 A, 30 V (dc) resistive or 1.0 A,
30 V (ac) non-inductive.

Signal Type C - Error output
SignalThis can be used as an output signal to other external instruments to confirm
whether any error conditions exist.
Signal: Open collector transistor (ground emitter) rated at 40 V max. VCE,
50 mA IC max.
Transistor on = error condition exists,
Transistor off = no error condition exists(2019-10)

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19

9-pin (DE-9P) D-subminiature DIGITAL I/0 Connections
Pin
no.

Description

1
2
3
4
5

IG Sensor on/off
Groundn.a.
IG on/off Status relay common
IG on/off status relay - Normally Closed
Relay open = IG onn.a.
GroundError status, Low = error exists
IG on/off status relay - Normally open
Relay closed = IG on

6
7
8
9

4.2.10 RS232 / RS485 Serial
Communications
Connection

SignalType

Digital I/O
Connector

A
A
B
B
A
C
B

Either RS232 or RS485 serial communications may be used to send / receive commands to / from the VGC083C. There are two DE9 (D-subminiature, shell size E,
9 pole) connectors that allow independent cable connections to the RS232 andRS485 serial communication ports. Six serial communication protocols are supported.
1. RS485 with address, start and stop characters and command / response syntax
derived from the INFICON BAG302 IG protocol.
2. RS232 with start and stop characters, but no addressing is used. The syntax isthe same as the RS485 protocol.
3. RS232 protocol compatible with the Granville-Phillips Series 307 and 358
controllers.
4. RS485 protocol compatible with the Granville-Phillips Series 307 and 358
controllers.

The RS232 serial port is configured to allow, for example, a 9-pin extension cable,
male to female, wired "pin-to- pin" to be connected from the VGC083C to yourserial port. DO NOT connect both of the RS232 and RS485 cables to the
VGC083C at the same time. The VGC083C cannot provide both RS232 andRS485 serial communications at the same time. Only one or the other as programmed by the user.

An extension cable wired pin-to-pin
may be used to connect the RS232
serial port on the VGC083C directly toyour PC serial port (a converter may benecessary).

20

DE-9 Connectors for connections touser supplied cables for serial
communication port – DE9P (RS485),
DE9S (RS232)

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9-contact (DE-9S) D-subminiature RS232 Connections
Socket
no.
1
2
3
4
5
6
7
8
9

Description

RS232
Connector

No connection
Transmitted Data (OUT)
Received Data (IN)No connection
Signal GroundNo connection
No connection
No connection
No connection

Connect either RS232 or RS485 cable to VGC083C - DO NOT CONNECT
BOTH AT THE SAME TIME
9-pin (DE-9P) D-subminiature RS485 Connections
Pin
no.

Description

1
2
3
4
5
6
7
8
9

DATA A (–)
DATA B (+)
No connection
No connection
No connection
Signal GroundNo connection
No connection
No connection

RS485
Connector

Connect either RS232 or RS485 cable to VGC083C - DO NOT CONNECT
BOTH AT THE SAME TIME

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21

5 Operation - IG and CG

5.1 IG Over Pressure Shut
Down

The MAG050 / MAG060 cold cathode ion gauge will shut off automatically should
the pressure reach or rise above the overpressure shut down value shown below. If
desired user can adjust the OVER PRESSURE value in the ION GAUGE menu:
Overpressure Shut Down
mbar

Torr
5.00 × 10-3

6.65 × 10

-3

Pa
6.65

5.2 Convection Gauge (CG)
Initial Setup

Two of the most important steps for the initial setup of the convection gauges are to
set zero (SET VAC) and set atmosphere (SET ATM) as described in the CONVEC
GAUGE section 6.5.3. This will ensure proper operation of the gauge and accuratepressure measurements. The gauge is calibrated at the factory using nitrogen. Furthermore, the gauge is also installed in a certain orientation when calibrated at thefactory. Without setting zero and atmosphere after the gauge is installed in yoursystem, the gauge may not display the expected and correct pressures. This could
be caused by the fact that you may be using a different gas than Nitrogen such as
air to setup and calibrate the gauge (most commonly the case) and the gaugeorientation is different than the orientation used at the factory. As such, it is very
important to perform your own initial setup and calibration by setting zero and atmosphere with the gauge installed in your actual system. Please note the following:

Setting Zero (SET VAC)

Setting zero optimizes performance of the gauge when operating at a low pressure-4-3
range of 1.00 × 10 Torr to 1.00 × 10 Torr. If your minimum operating pressure is-3higher than 1.00 × 10 Torr, it is not normally necessary to set zero and thus setting atmosphere should be adequate. If you are able to evacuate your system to-4
below 1.00 × 10 Torr, it is always a good practice to check and set zero if necessary. See "SET VAC CG1" or SET "VAC CG2" in CONVEC GAUGE section 6.5.3.

Setting Atmosphere (SET ATM)

Setting atmosphere is the most important step for a newly installed gauge. If you
prefer to use air to set atmosphere, vent your vacuum system chamber to expose
the gauge to the local atmospheric pressure (air) and set atmosphere to matchyour known local uncorrected barometric pressure (air). This is the reading of
ambient air pressure you will expect if you were to vent and open your vacuum
chamber to the atmosphere surrounding the outside of your chamber. At sea level,
this pressure is usually near 760 Torr. At elevations above sea level, the pressure
decreases. Check your local aviation authority or airport web sites or your current
local weather conditions online to help find your local uncorrected barometric pressure if you do not have this information. See "SET ATM CG1" or "SET ATM CG2"
CONVEC GAUGE section 6.5.3.

NOTE

Setting zero and atmosphere is normally required only once during the initial setup
and maybe checked by the user periodically. After power has been applied to thegauge during the initial setup, allow five minutes for the gauge to stabilize (warmup) before setting zero and atmosphere.

The information presented in sections 5.1 and 5.2, above, is intended as an introduction to the programming capabilities of the VGC083C for use in controlling theselectable parameters and functions of the MAG050 / MAG060 IG and PEG050
CG transducers. Refer to the Operating Manuals for the MAG050 / MAG060 ion
gauge and PEG050 convection gauge for complete operation and setup
instructions of these connected devices.

22

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5.3 Cond Cathode
Activation Delay

The cold cathode gauge wil exhibit some level of activation time delay when thesensor is being activated at pressures below 1.00E-05 Torr. This is the timeneeded for the electrical discharge to establish itself at low pressures. The delay
time increases at low pressures, and is typically:-8

7.5×10 Torr
-9
7.5×10 Torr
-10
7.5×10 Torr

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0.1 minute
1 minute
5 minutes

23

6 Setup and programming

6.1 Applying Power

Before you turn on power to the VGC083C for the first time, ensure the cables fromthe VGC083C to the MAG050 / MAG060 and PGE050 convection gauges are connected and secured. Turn on power by pressing the Power key.

6.2 Front Panel Display
Display - Pressure Measurement

24

The VGC083C provides three independent front panel LED displays:•(IG) display represents pressure measurements from the MAG050 /MAG060 ion gauge.

•(CG1) display represents pressure measurements from the first convection
gauge.

•(CG2 or CG2-ALT) display represents pressure measurements from thesecond convection or an alternate gauge.

Display - Units of Measure

A white LED is illuminated next to the selected engineering unit indicating measurements in Torr, mbar or Pa (the pascals unit of measure is indicated as 'Pa' on
the front panel; millibars unit is indicated as mbar).

Display - Setup Screen

The VGC083C provides an independent setup and programming OLED setup
screen. This screen is used for set up, programming and operation of the ion andconvection vacuum gauges. Other useful information such as relay status indicators and error messages are also displayed in the setup screen.

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6.3 User Interface Basics

NOTE

6.4 Factory-Set Default
Parameters
SETUP UNIT

ION GAUGE

CONVEC GAUGE

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The setup and programming of the VGC083C controller is done via the four programming-keys located below the OLED setup screen on the left hand side of the
VGC083C front panel. During programming of the VGC083C, the OLED display will
identify what function each key represents.
To begin programming, press the MENU key. Press the UP and DOWN key toselect the desired menu and change the parameters. Press the ENTER key toaccess the parameters and save the new settings. Press the MENU Key to returnto the previous menu or press repeatedly to return to the main screen. To continue
setting additional parameters, scroll with the UP and DOWN keys until you reachthe desired parameter then press ENTER.

The value of certain menu parameters must be programmed within an allowable
range or limit. If the user tries to program a value that is outside of the allowable
range of a specific menu, the setup screen will momentarily display the message"NO CHANGE". In this case, the user needs to access the specific menu again,and enter a correct value that is within the allowable range.

The following is a summary of all factory-set default values in the VGC083C setup
screen menu.

•

UNITS [Factory default = TORR]•INFO [Factory default = FIRMWARE VERSION]•SET CG2-ALT [Factory default = CG2]•

ALT GAUGE [Factory default = 10 TORR CDG]•

ALT GAUGE CAL [Factory default = Factory Set Number]•

DEFAULTS [Factory default = PRESS ENTER TO SET OR MENU TO EXIT
(not useable if IG sensor is on)]•

HV TIMEOUT [Factory default = 2 minutes]•

SENSITIVITY [Factory default = 10.00]•

OVER PRES 100 [Factory default = 5.00E-03]•

IG TRIP PRES [Factory default = 1.00E-03]•

IG CONTROL [Factory default = MANUAL MODE]•

CAL FACTORS [Factory default = C0, C1, C2, C3, C4, C5 all factory-set to 50]•

IG CONTROL [Factory default = MANUAL MODE]•

SET VAC CG1 [Factory default = 0.00E 00]•

SET ATM CG1 [Factory default = 7.60E 02 TORR]•SET VAC CG2 [Factory default = 0.00E 00]•

SET ATM CG2 [Factory default = 7.60E 02 TORR]

25

RELAYSANALOG OUTPUTSERIAL COMMDISPLAY

6.5 Programming•

ASSIGN REL 1 [Factory default =ION GAUGE]•ASSIGN REL 2 [Factory default =CG1]•

ASSIGN REL 3 [Factory default =CG2]•

ASSIGN REL 4 [Factory default =ION GAUGE]•ASSIGN REL 5 [Factory default =CG1]•

ASSIGN REL 6 [Factory default =CG2]•

REL 1 LO TRIP [Factory default = 1.00E-06]•

REL 1 HI TRIP [Factory default = 2.00E-06]•

REL 2 LO TRIP [Factory default = 1.00E-01]•

REL 2 HI TRIP [Factory default = 2.00E-01]•

REL 3 LO TRIP [Factory default = 1.00E-01]•

REL 3 HI TRIP [Factory default = 2.00E-01]•

REL 4 LO TRIP [Factory default = 1.00E-06]•

REL 4 HI TRIP [Factory default = 2.00E-06]•

REL 5 LO TRIP [Factory default = 1.00E-01]•

REL 5 HI TRIP [Factory default = 2.00E-01]•

REL 6 LO TRIP [Factory default = 1.00E-01]•

REL 6 HI TRIP [Factory default = 2.00E-01]•

TEST RELAYS•ANALOG OUT 1 [Factory default = IG - CG1 0.5 - 7V]•

ANALOG OUT 2 [Factory default = CG1 1 - 8 V ]•ANALOG OUT 3 [Factory default = CG2 1 - 8 V ]•AOUT CAL 1 [Factory default = Factory Set Number]•

AOUT CAL 2 [Factory default = Factory Set Number]•

AOUT CAL 3 [Factory default = Factory Set Number]•

AOUT LIN 1 [Factory default = 1.00E 00]•

AOUT LIN 2 [Factory default = 1.00E 00]•

AOUT LIN 3 [Factory default = 1.00E 00]•

COMM TYPE [Factory default = RS485]•

BAUDRATE [Factory default = 19200 BAUD]•FRAMING [Factory default = 8 BITS NONE 1]•

ADDRESS [Factory default = 01]•

SCREEN SETUP [Factory default = NORMAL]•SCREEN SAVER [Factory default = ON]•

BRIGHTNESS [Factory default = 0]•

LED BRIGHTNESS [Factory default = 8]This section provides detailed information on programming and configuration ofvarious menus and submenus of the device.
This key, on the VGC083C front panel, is referred to as the 'ENTER'
key throughout this manual.
From the main menu (press the MENU key if the main menu is not shown), scroll
Up or Down to SETUP UNIT then press the ENTER key to access the SETUP
UNIT menu for configuring the VGC083C general parameters such as the units ofmeasure, selecting CG2 verses ALTERNATE GAUGE, etc. In certain instances,during setup of the programmed functions and settings, you may need to press the
ENTER key until you reach the end of a program/setup sequence before pressing
the MENU key to return to the main menu or previous setup screen.

26

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6.5.1 SETUP UNIT
UNITS

[Factory default = TORR]
This allows the user to display the pressure measurements in Torr, mbar orpascals. The user must program all other programming values according to theirrequirements.

INFO[Factory default = FIRMWARE VERSION]
Displays type of ion gauge (IG) it operates as COLD CATHODE and the firmware
version numbers associated with the VGC083C controller and the VGC083C internal board that operates the IG.

SET CG2 - ALT[Factory default = CG2]This allows the user to assign the type of gauge to the CG2/ALT display. The user
can either assign a second convection gauge CG2 (same type as CG1 using
INFICON's PGE050 convection gauge sensor) or an analog voltage input signal
from an alternate gauge. The ANALOG INPUT selection allows processing of one
analog input voltage signal from INFICON's capacitance diaphragm gauge (CDG)or other brands of CDGs with a 0-10 V (dc) output signal. The ANALOG INPUT
selection can also provide processing of one analog input voltage signal fromINFICON vacuum gauge modules PGE500, PGE300, BAG302. Note that using a
CDG or the INFICON vacuum gauge modules listed above requires the user toprovide an external power source to these devices.

ALT GAUGE[Factory default = 10 TORR CDG]
Ignore this menu if you have selected CG2 in the SET CG2 - ALT menu above. If
you have selected ANALOG INPUT in the SET CG2 - ALT menu above, the ALTGAUGE menu selection is used to assign the type of alternate gauge.

ALT GAUGE CAL•

Select 100 mTORR CDG for a 100 mTorr Capacitance Manometer / Diaphragm
Gauge (CDG) with 0-10 V (dc) analog output.

•

Select 20 TORR CDG for a 20 Torr full scale CDG with 0-10 V (dc) analog
output. Other full scale selections are 50 TORR CDG, 100 TORR CDG,
200 TORR CDG, 500 TORR CDG, 1000 TORR CDG, 10 mTORR CDG,
20 mTORR CDG, 50 mTORR CDG, 100 mTORR CDG, 250 mTORR CDG,
500 mTORR CDG, 1 TORR CDG, 2 TORR CDG and 5 TORR CDG.

•

Select ITI LOG CG if you are using INFICON's convection gauge modules suchas the PGE300 or PGE500 with a Log-linear analog output.

•

ITI LOG IG7V is reserved for future use. Currently not applicable.

•

Select ITI LOG IG if you are using INFICON's ionization gauge module such as
the BAG302 IG with a Log-linear analog output.

•

Select ITI NON-LINEA if you are using INFICON's convection gauge modules
such as the PGE300 or PGE500 with a non-linear analog output.

[Factory default = Factory Set Number]
Ignore this menu if you have selected CG2 in the SET CG2 - ALT menu above. If
you have selected ANALOG INPUT in the SET CG2 - ALT menu above, the ALTGAUGE CAL menu selection is used to optimize the analog input calibration. It is
recommended that the user not make this adjustment unless the displayed alternate gauge pressure (CG2/ALT display channel) do not closely match the expectedpressure from the analog input calculations.
Example - To perform ALT GAUGE CAL if ALT GAUGE menu is selected for a1000 TORR CDG. Connect both the CDG and a high resolution voltmeter to the +and – terminals of the VGC083C Analog Input Connector labeled AI. With CDG
exposed to atmosphere, measure the analog input from the CDG at the VGC083C
Analog Input Connector and calculate the corresponding pressure. In the ALTGAUGE CAL screen use the UP or DOWN keys to adjust the displayed pressure
by the VGC083C to match the calculated pressure from the CDG analog signal.
For example, if the analog input signal from the CDG is at 7.600 volts representing
760 Torr for a 1000 TORR CDG, then adjust the ALT GAUGE CAL so that the
VGC083C also displays 760 Torr. For other CDG ranges always use CDG's fullscale pressure value to perform calibration. For example, if you are using atinb42e1-a(2019-10)

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27

100 TORR CDG, evacuate your system pressure to 100 Torr and use the same
calibration procedure above.
Example - To perform ALT GAUGE CAL if ALT GAUGE menu is selected for ITI
LOG CG, ITI LOG IG or ITI NON-LINE. When using other INFICON vacuum gauge
modules such as PGE300, PGE500 or BAG302 as alternate gauges to CG2, theanalog output signals from these devices can be used to display pressure in theCG2/ALT display channel. Connect the analog output from these devices to the +and – terminals of the VGC083C Analog Input Connector labeled AI. In the ALTGAUGE CAL screen use the UP or DOWN keys to adjust the displayed pressure
by the VGC083C to match the pressure reading on the modules.

NOTE

DEFAULTS

As you adjust the analog output, the number being displayed in the ALT GAUGECAL screen represents the millivolts offset from zero volts that is being used internally for the analog input gain adjustment.
[Factory default = PRESS ENTER TO SET OR MENU TO EXIT]
The system can be returned to the original factory settings by using the ENTER
key to set factory defaults.
If you reset all values to original factory default settings, you would need to repeat
the initial setup procedure for the convection gauges as described in section 5.2
and reprogram other parameters as required.

6.5.2 ION GAUGENOTICEHV TIMEOUT

Before you activate the ion gauge sensor, make sure you understand all instructions and information provided in this manual and the Operating Manuals for theMAG050 / MAG060 cold cathode ion gauge and the PGE050 convection gauge.
Furthermore, you should ensure you have fully configured the VGC083C control
unit to your operational requirements before turning the ion gauge sensor on. Prior
to turning on the ion gauge sensor you should ensure the pressure is below the
OVER PRESSURE value programmed in the VGC083C. Press the ENTER Key toaccess the ION GAUGE menu for configuring the MAG050 / MAG060 ionization
gauge sensor.
[Factory default = 2 minutes]
Enter this menu choice to program the maximum wait period after the cold cathodesensor on command is invoked and the MAG050 / MAG060 starts to readpressure. This time period can be set from 1 to 60 minutes. Default setting is
2 minutes.
The cold cathode gauge will exhibit some level of activation time delay when thesensor is being activated at pressures below 1.00E-05 Torr. This is the timeneeded for the electrical discharge to establish itself at low pressures. The delay
time increases at low pressures, and is typically:-8

7.5×10 Torr
-9
7.5×10 Torr
-10
7.5×10 Torr≈≈≈

0.1 minute
1 minute
5 minutes

The HV TIMEOUT is the time allowed for the gauge to activate during which time
the unit will attempt repeatedly to turn on the anode voltage. If the gauge has notbeen activated after this time has elapsed, the unit will stop attempting to turn on
the anode voltage and the user will be prompted with "DISCHARGE FAIL" or"CURRENT FAIL" error messages. If this is the case, the user must clear the error
and repeat the process of turning on the anode voltage again.

SENSITIVITY[Factory default = 10]
Factory pre-set SENSITIVITY for the MAG050 / MAG060 is always 10 and may be
adjusted by the user if necessary. Ion gauge pressure readings are calibrated for
air/nitrogen. If you use a different species of gas or mixture of gases you will be
required to either make manual corrections to the pressure readout or compensate
the reading. The SENSITIVITY value programmed in the VGC083C can be adjusted to compensate the reading for a gas other than nitrogen/air. Compensating28

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the pressure reading using the SENSITIVITY adjustment method may not be
possible for certain gases if the new calculated SENSITIVITY results in a value
outside the adjustment range.
CAUTION! The user assumes all risks if the SENSITIVITY is programmed toa value not matching the actual head (sensor) sensitivity described above. Failure
to ensure that the VGC083C is programmed for the actual sensitivity of the head it
is used with may result in pressure readings that are not true pressure. Equipment
damage due to incorrect pressure readings and improper system control functions
as a result of incorrect pressure measurement readings may result.

OVER PRESSURE[Factory default = 5.00E-03]
This function allows the user to set the pressure at which the gauge will turn off
when the vacuum vessel pressure rises above this setting. The overpressure shut
down values are adjustable - set this value to a pressure level that is acceptable foryour application. Operating any ion gauge at too high of a pressure in the presenceof certain gases and gas mixtures may result in significant sputtering action of theinternal electrodes of the transducer (sensor) leading to changes in performance ofthe device.

IG TRIP PRES

[Factory default = 1.00E-03]
This setting allows the user to select a pressure value at which CG1, CG2 or
ALT GAUGE can turn the cold cathode sensor on. The IG TRIP PRES value for theMAG050 / MAG060 can never be set higher than 5.00E-03 Torr.

IG CONTROL[Factory default = MANUAL MODE]
This function allows the user to choose the source of control for the IG. The IG canbe controlled from the Front Panel (MANUAL MODE), CG1, CG2 or the ALTGAUGE.
Select MANUAL MODE if you wish to use the front panel IG ON/OFF key to turnthe cold cathode ion gauge sensor to the on or off state.
Select CG1, CG2 or ALT GAUGE if the pressure measurement from CG1 or CG2
or the Alternate Gauge is to be used to automatically turn the ion gauge sensor on
and off.
When CG1, CG2 or ALT GAUGE is selected in the IG CONTROL menu, the user
cannot turn off or turn on the IG sensor manually using the IG ON/OFF key of thefront panel, RS232, RS485 or DIGITAL I/O signals.

CAL FACTORS[Factory default = C0, C1, C2, C3, C4, C5 all factory-set to 50]
Do not change CAL FACTORS values. This menu is intended for future enhancement of the VGC083C capabilities. Leave C0, C1, C2, C3, C4, and C5 CAL
FACTORS values at the factory default setting of 50. Changing these values to anumber other than 50 will result in inaccurate vacuum pressure measurements.

6.5.3 CONVEC GAUGENOTICE

It is important to set vacuum and atmosphere when initially setting up the convection gauges. See Convection Gauge Initial Setup section 5.2
This programming menu allows the user to set the atmospheric pressure reading(also known as the "span" adjustment) and vacuum reading ("zero" point) for convection gauges CG1 and CG2. INFICON advises that you first determine if the"span" (ATM) adjustment of your measurement device is set properly before setting the "zero" (VAC) adjustment. It is good practice to perform the sequence ofchecking and adjusting ATM (span) then VAC (zero) and then, finally re-checking
the ATM setting to ensure that the circuitry is properly balanced for use in measuring pressure throughout the intended measurement range. Press the ENTER key
to access the CONVEC GAUGE menu for configuring the convection gauges.

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29

SET VAC CG1[Factory default = 0.00E 00]
Press the ENTER key to access the SET VAC CG1 screen.
1. To properly set the vacuum reading (“zero” point), with CG1 installed on yourvacuum system, the gauge should be evacuated to a pressure below
1.00E-04 Torr (0.1 mTorr). [Factory default = 0.00E+0 Torr]
2. When the known vacuum system pressure is below 0.1 mTorr and If you want
to set zero at 0.00E+0, then press the ENTER key repeatedly until the SETVAC CG1 appears on the display again. The zero point (displayed pressure
reading with gauge exposed to vacuum) is now set.
If you want to set the ‘zero’ pressure reading to a number higher than 0.00E+0,then press the UP or DOWN keys at each of the high-lighted numeral locations
until the desired number is reached; then press the ENTER key repeatedly until
the SET VAC CG1 appears on the display again. The new "zero point" is now
set. Due to the nature of circuit operation and head electrical control that covera wide range of measurement by a convection gauge, it is advised that one firstcheck and adjust, if necessary, the "span" and "zero" to ensure that allmeasurements made between these two, adjusted settings are as accurate as
possible.

SET ATM CG1[Factory default = 7.60E 02 TORR]
Press the ENTER key to access the SET ATM CG1 screen.
Backfill the vacuum vessel /chamber with nitrogen gas to a known pressure between 400 Torr and 1000 Torr. Alternatively, if your local uncorrected barometricpressure (air) is known, simply vent your vacuum system chamber to expose thegauge to the local atmospheric pressure. When desired system pressure is stable,
adjust the pressure on the screen to the known value using the UP or DOWN keys.
Press the ENTER key to move to the next digit and use the UP or DOWN keys todecrease or increase the value of that digit. Continue pressing the ENTER key until
the SET ATM CG1 reappears on the display. The new atmosphere point is now
set. For example, if your known local uncorrected barometric pressure is 760 Torr,
enter 760 in the SET ATM screen. The main pressure measurement screen will
now display 760 Torr while the gauge is at atmosphere.

SET VAC CG2[Factory default = PRESS ENTER TO SET VAC]
Same as SET VAC CG1 above, except for CG2

SET ATM CG2[Factory default = 7.60E 02 TORR]
Same as SET ATM CG1 above, except for CG2.

6.5.4 RELAYSASSIGN REL 1

Press the ENTER key to access the RELAYS menu for configuring the setpoint
relays.
[Factory default = ION GAUGE]
This assigns Relay #1 to the ion gauge, CG1, CG2 or ALT GAUGE (alternate
gauge).

ASSIGN REL 2[Factory default = CG1]ASSIGN RELAY 2; same choices as ASSIGN RELAY 1 above

ASSIGN REL 3[Factory default = CG2]ASSIGN RELAY 3; same choices as ASSIGN RELAY 1 above

ASSIGN REL 4[Factory default = ION GAUGE]ASSIGN RELAY 4; same choices as ASSIGN RELAY 1 above30

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ASSIGN REL 5[Factory default = CG1]ASSIGN RELAY 5; same choices as ASSIGN RELAY 1 above

ASSIGN REL 6[Factory default = CG2]ASSIGN RELAY 6; same choices as ASSIGN RELAY 1 above

REL 1 LO TRIP

[Factory default = 1.00E-06]
This setpoint corresponds to the turn on point for Relay #1. Relay #1 will turn on
when the pressure drops below this setting. If you are unable to increase the valueof REL 1 LO TRIP (VGC083C responding with the message "NO CHANGE"), youmust first access the REL 1 HI TRIP menu below and increase that value to anumber higher than the value of the REL 1 LO TRIP you are trying to set. Ensure
the REL 1 LO TRIP setpoint value you are programming is within the measurement
range of the specific gauge the relay is assigned to.

REL 1 HI TRIP

[Factory default = 2.00E-06]
This setpoint corresponds to the turn off point for Relay #1. Relay #1 will turn off
when the pressure rises above this setting. If you are unable to decrease the valueof REL 1 HI TRIP (VGC083C responding with the message "NO CHANGE"), youmust first access the REL 1 LO TRIP menu above and decrease that value to anumber lower than the value of the REL 1 HI TRIP you are trying to set. Ensure the
REL 1 HI TRIP setpoint value you are programming is within the measurement
range of the specific gauge the relay is assigned to.

REL 2 LO TRIP

[Factory default = 1.00E-01](RELAY 2 LO TRIP; same info as RELAY 1 LO TRIP above)

REL 2 HI TRIP

[Factory default = 2.00E-01](RELAY 2 HI TRIP; same info as RELAY 1 HI TRIP above)

REL 3 LO TRIP

[Factory default = 1.00E-01](RELAY 3 LO TRIP; same info as RELAY 1 LO TRIP above)

REL 3 HI TRIP

[Factory default = 2.00E-01](RELAY 3 HI TRIP; same info as RELAY 1 HI TRIP above)

REL 4 LO TRIP

[Factory default = 1.00E-06](RELAY 4 LO TRIP; same info as RELAY 1 LO TRIP above)

REL 4 HI TRIP

[Factory default = 2.00E-06](RELAY 4 HI TRIP; same info as RELAY 1 HI TRIP above)

REL 5 LO TRIP

[Factory default = 1.00E-01](RELAY 5 LO TRIP; same info as RELAY 1 LO TRIP above)

REL 5 HI TRIP

[Factory default = 2.00E-01](RELAY 5 HI TRIP; same info as RELAY 1 HI TRIP above)

REL 6 LO TRIP

[Factory default = 1.00E-01](RELAY 6 LO TRIP; same info as RELAY 1 LO TRIP above)tinb42e1-a(2019-10)

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31

REL 6 HI TRIP

[Factory default = 2.00E-01](RELAY 6 HI TRIP; same info as RELAY 1 HI TRIP above)

TEST RELAYS[Factory default = OFF]This allows the user to manually toggle the relays on and off to test for correct
external circuit wiring and ensure polarity is as desired. Press ENTER to accessthe TEST RELAYS menu. Select a specific relay by pressing the ENTER key sothat the relay number is highlighted. Press the UP or DOWN key to energize thespecific relay.
Relays will return to the previous state after exiting the TEST RELAYS menu.

6.5.5 Analog Output

ANALOG OUT 1

The VGC083C provides three analog outputs proportional to the pressure measured by the ionization gauge, the selected convection gauge (CG1 or CG2) or acontinuous, combined output signal from the IG and CG1 (IG - CG1) for full range
measurement. Press the ENTER key to access the ANALOG OUTPUT menu forconfiguring the analog outputs.
[Factory default = CG1 - CG1]
This menu provides various scaling and gauge type selections for Analog Output#1. Use the UP and DOWN keys to select the desired analog output configurationfrom the following available choices.
IG - CG1 0.5 - 7V
IG - CG2 0.5 - 7V
IG - ALT 0.5 - 7V
IG LOG N - 10
IG LOG N - 11
IG LOG N - 12
IG 1.8 - 8.7V
IG LINEAR
ALT LINEAR
ALT CG 1-8V
ALT IG LOGN10
CG1 1 - 8V
CG2 1 - 8V
CG1 0 - 7V
CG2 0 - 7V
CG1 NON - LIN
CG2 NON - LIN
CG1 LINEAR
CG2 LINEAR

32

Log-linear analog output combining IG & CG1 as one signal
Log-linear analog output combining IG & CG2 as one signal
Log-linear analog output combining IG & Alternate gauge as
one signal
Log-linear analog output for IG only, output also compatible
with GP 307, 350
Log-linear analog output for IG only, output also compatible
with GP 307, 350, 358
Log-linear analog output for IG only, output also compatible
with GP 307, 350
Log-Linear analog output for IG only
Linear analog output for IG only, output also compatible with
GP 307
Linear analog output for alternate gauge only
Log-linear analog output if alternate gauge connected is an
INFICON PGE300 or PGE500
Log-linear analog output if alternate gauge connected is an
INFICON BAG302
Log-linear analog output for CG1
Log-linear analog output for CG2
Log-linear analog output for CG1 , output also compatible
with GP 307,350,358
Log-linear analog output for CG2 , output also compatible
with GP 307,350,358
Non-linear analog output for CG1
Non-linear analog output for CG2
Linear analog output for CG1
Linear analog output for CG2

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Select "IG - CG1 0.5 - 7V" as the analog output type to set the analog output voltage proportional to the pressure measured by the combination of IG plus CG1.
This selection combines the analog output from the IG and CG1 as one signal toprovide a log-linear analog output voltage of 0.5 volts to 7 volts with a scaling factorof 0.5 V/decade of measured pressure. The log-linear output signal and pressure
are related by the following formulas when Pressure Unit of measurement is in Torr(volts – 5.5) / (0.5)
where P is the pressure in Torr or mbar, and V isand mbar: P = 10
the output signal in volts. Refer to section 7.1 for details regarding this type of output signal.
Select "IG - CG2 0.5 - 7V" as the analog output type to set the analog output
voltage proportional to the pressure measured by the combination of IG plus CG2.
The analog output characteristics is the same as described for "IG - CG1 0.5 - 7V"
above.
Select "IG - ALT 0.5 - 7V" as the analog output type to set the analog output
voltage proportional to the pressure measured by the combination of IG plus theAlternate gauge. The analog output characteristics is the same as described for"IG - CG1 0.5 - 7V" above. Note that the "IG - ALT 0.5 - 7V" selection is mainly
intended for use with an alternate gauge which has a wide measurement range
from atmosphere to the turn-on point for the ion gauge. INFICON convection
gauges such as the PGE300 or PGE500 provide this capability. If you are using acapacitance diaphragm gauge (CDG) as an alternate gauge you may want toconsider a different output since a single CDG may not provide measurementsfrom atmosphere to the turn-on point for the ion gauge.
Select "IG LOG N - 10" as the analog output type to set the analog output voltage
proportional to the pressure measured by the ion gauge only. This selection provides an output voltage that is linear with respect to the common logarithm of pressure, i.e., log-linear analog output of 0 to 9 volts with a scaling factor of 1 V/decadeof measured pressure. The log-linear output signal and pressure are related by thefollowing formulas when Pressure Unit of measurement is in Torr and mbar:(volts – 10)
where P is the pressure in Torr or mbar, and V is the output signal in
P= 10
volts. Refer to section 7.2 for details regarding this type of output signal. This
selection is compatible with the analog output scaling from the Granville-Phillips
307 and 350 controllers.
Select "IG LOG N - 11" as the analog output type to set the analog output voltage
proportional to the pressure measured by the ion gauge only. This selection provides an output voltage that is linear with respect to the common logarithm of pressure, i.e., log-linear analog output of 0 to 10 volts with a scaling factor of 1 V / decade of measured pressure. The log-linear output signal and pressure are relatedby the following formulas when Pressure Unit of measurement is in Torr and mbar:
10(volts – 11)
where P is the pressure in Torr or mbar, and V is the output signal inP=
volts. Refer to section 7.3 for details regarding this type of output signal. This selection is also compatible with a certain analog output scaling from the GranvillePhillips 307, 350 and 358 controllers.
Select "IG LOG N - 12" as the analog output type to set the analog output voltage
proportional to the pressure measured by the ion gauge only. This selection provides an output voltage that is linear with respect to the common logarithm of pressure, i.e., log-linear analog output of 0 to 11 volts with a scaling factor of 1 V / decade of measured pressure. The log-linear output signal and pressure are relatedby the following formulas when Pressure Unit of measurement is in Torr and mbar:
10(volts – 12)
where P is the pressure in Torr or mbar, and V is the output signal inP=
volts. Refer to section 7.4 for details regarding this type of output signal. This selection is also compatible with a certain analog output scaling from the GranvillePhillips 307 and 350 controllers.
Select "IG 1.8 - 8.7V" as the analog output type to set the analog output voltage
proportional to the pressure measured by the ion gauge only. This selection provides an output voltage that is linear with respect to the common logarithm of pressure, i.e., log-linear analog output of 1.8 to 8.7 volts with a scaling factor of 0.8
V/decade of measured pressure. The log-linear output signal and pressure are related by the following formulas when Pressure Unit of measurement is in Torr((1.25 × volts) – 12.875))
where P is the pressure in Torr and V is the output signal in
P= 10
volts. Refer to section 7.5 for details regarding this type of output signal.
Select "IG LINEAR" as the analog output type to provide a 0-10 Vdc output signalthat has a direct linear relationship to the displayed pressure measured by the ion
gauge only. This selection covers 3 decades of pressure change. For example, if
the maximum pressure selected is 1.00E-03 Torr (value programmed for AOUT
LIN 1 or AOUT LIN 2 or AOUT LIN 3 menu below), then the instrument provides a
10 volt analog output signal when pressure is at 1.00E-03 Torr and the minimumpressure is automatically set to 1.00E-06 Torr, with a corresponding minimum volttinb42e1-a(2019-10)

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age output of 0.01 volts. If your application requires the IG analog output voltage tocover a pressure range exceeding three decades, then consider using the loglinear analog outputs. Refer to section 7.6 for details regarding this type of output
signal. This selection is also compatible with a certain analog output scaling fromthe Granville-Phillips 307 controller.
Select "ALT LINEAR" only if you have selected ANALOG INPUT in the SET CG2 ALT menu intended for use with a CDG device as an alternate gauge to CG2. Ifsuch is the case, this analog output type provides a 0-10 Vdc analog output signalthat has a direct linear relationship to the displayed pressure measured by thealternate gauge. This selection covers 3 decades of pressure change. Essentially,
this allows retransmission of the same analog input signal being received by the
VGC083C. For example, if ALT GAUGE selected is 1000 TORR CDG, the maximum pressure should also be programmed as 1.00E03 Torr (value programmedfor AOUT LIN 1 or AOUT LIN 2 or AOUT LIN 3 menu below), then the instrument
provides a 10 volt analog output signal when pressure is at 1.00E03 Torr and theminimum pressure is automatically set to 1.00 Torr, with a corresponding minimum
voltage output of 0.01 volts.
Select "ALT CG 1-8V" only if you have selected ANALOG INPUT in the SET CG2 ALT menu intended for use with an INFICON PGE300 or PGE500 convection
vacuum gauge module as an alternate gauge to CG2. Essentially, this allows retransmission of the same analog input signal being received from the PGE300 or
PGE500. This selection provides an output voltage that is linear with respect to thecommon logarithm of pressure, i.e., log-linear analog output of 1 to 8 volts with ascaling factor of 1 V/decade of measured pressure. The log-linear output signal
and pressure are related by the following formulas when Pressure Unit of measure10(volts – 5)
where P is the pressure in Torr or mbar, andment is in Torr and mbar: P=
V is the output signal in volts.
Select "ALT IG LOGN10" only if you have selected ANALOG INPUT in the SET
CG2 - ALT menu intended for use with an INFICON BAG302 ionization vacuum
gauge module as an alternate gauge to CG2. Essentially, this allows retransmission of the same analog input signal being received from the BAG302. This selection provides an output voltage that is linear with respect to the common logarithmof pressure, i.e., log-linear analog output of 0 to 9 volts with a scaling factor of
1 V/decade of measured pressure. The log-linear output signal and pressure are
related by the following formulas when Pressure Unit of measurement is in Torr(volts – 10)
where P is the pressure in Torr or mbar, and V is theand mbar: P= 10
output signal in volts.
Select "CG1 1 - 8V" as the analog output type to set the analog output voltage
proportional to the pressure measured by convection gauge CG1. This selection
provides an output voltage that is linear with respect to the common logarithm ofpressure, i.e., log-linear analog output of 1 to 8 volts with a scaling factor of
1 V/decade of measured pressure. The log-linear output signal and pressure are
related by the following formulas when Pressure Unit of measurement is in Torr(volts – 5)
where P is the pressure in Torr or mbar, and V is theand mbar: P= 10
output signal in volts. Refer to section 7.7 for details regarding this type of output
signal.
Select "CG2 1 - 8V" for CG2. Same as CG1 1 - 8V above, except for CG2.
Select "CG1 0 - 7V" as the analog output type to set the analog output voltage
proportional to the pressure measured by convection gauge CG1. This selection
provides an output voltage that is linear with respect to the common logarithm ofpressure, i.e., log-linear analog output of 0 to 7 volts with a scaling factor of 1 V /decade of measured pressure. The log-linear output signal and pressure are
related by the following formulas when Pressure Unit of measurement is in Torr(volts – 4)
where P is the pressure in Torr or mbar, and V is the outand mbar: P= 10
put signal in volts. Refer to section 7.8 for details regarding this type of output signal. This selection is compatible with the analog output scaling from the GranvillePhillips 307, 350 and 358 controllers.
Select "CG2 0 - 7V" for CG2. Same as CG1 0 - 7V above, except for CG2.^
Select "CG1 NON - LIN" as the analog output type to set the analog output (nonlinear) voltage proportional to the pressure measured by convection gauge CG1.
This produces a non-linear analog output signal of 0.375 to 5.659 V (dc) for 0 to1000 Torr of N2, roughly in the shape of an "S" curve. Refer to section 7.9 fordetails regarding this type of output signal. Note - This non-linear analog output is®
also equivalent to the Granville- Phillips Mini-Convectron® non-linear S-curveanalog output.
Select "CG2 NON - LIN" for CG2. Same as CG1 NON - LIN above, except for
CG2.
34

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Select "CG1 LINEAR" as the analog output type to provide a 0-10 Vdc output
signal that has a direct linear relationship to the displayed pressure measured by
CG1 only. This selection covers 3 decades of pressure change. For example, if the
maximum pressure selected is 1.00 Torr (value programmed for AOUT LIN 1 menu
below), then the instrument provides a 10 volt analog output signal when pressure
is at 1.00 Torr and the minimum pressure is automatically set to 1 mTorr(1.00E-03 Torr), with a corresponding minimum voltage output of 0.01 volts. If yourapplication requires CG1 or the analog output voltage to cover a pressure range
exceeding three decades, then consider using the log-linear analog output type.
Refer to section 7.10 for details regarding this type of output signal.
Select "CG2 LINEAR" for CG2. Same as CG1 LINEAR above, except for CG2.

ANALOG OUT 2[Factory default = CG1 1 - 8V](Same selection choices as ANALOG OUT 1 above)

ANALOG OUT 3[Factory default = CG2 1 - 8V](Same selection choices as ANALOG OUT 1 above)

AOUT CAL 1[Factory default = Factory Set]
This has been pre-set in the factory and is used to optimize the analog output
calibration. It is recommended that the user not make this adjustment unless thedisplayed pressure on the VGC083C and the resulting pressure recorded from theanalog output do not match closely.
To perform AOUT CAL 1 adjustment if ANALOG OUTPUT 1 is programmed for IG
LOG, IG LINEAR or ALT IG LOGN10. Connect the IG to the VGC083C and connect the VGC083C analog output 1 to a high resolution voltmeter, your system,
PLC, etc. Evacuate your vacuum system to a low enough pressure for the IG to
operate. Establish a system pressure so that the displayed IG reading is preferably
at the high end of any decade (for example 9.00E-05 as opposed to 1.00E-05). In
the AOUT CAL 1 screen use the UP or DOWN keys to adjust the analog output tomatch the corresponding pressure displayed on the IG pressure measurement
display or the CG2/ALT display channel if using a BAG302 ion gauge module as
an alternate gauge to CG2.

ExampleANALOG OUTPUT 1 is programmed for "IG LOG N - 10". The VGC083C IG
display is registering a pressure reading of 9.00E-05 Torr. Based on the equationand table given in section 7.2 the expected analog output at 9.00E-05 Torr is
5.9542 V. While in the AOUT CAL 1 screen, use the UP or DOWN keys to set theanalog output to 5.9542 V as recorded by your voltmeter. Alternatively, if the IG
analog output is used to display the IG pressure on your PLC or system display
console, simply adjust the AOUT CAL 1 so that the IG pressure displayed by yourPLC (pressure established at the high end of any decade preferred) matches theIG pressure displayed by the VGC083C. Note - As you adjust the analog output,
the number being displayed in the AOUT CAL 1 screen represents the millivolts
offset from zero volts that is being used internally for the analog output gain
adjustment.
To perform AOUT CAL 1 adjustment if ANALOG OUTPUT 1 is programmed for IG- CG1, CG1, CG2, CG1/CG2NON-LIN, CG1/CG2 LINEAR, ALT CG 1-8V. Connect
CG1 or CG2 to the VGC083C and connect the VGC083C analog output 1 to a highresolution voltmeter, your system, PLC, etc. While in the AOUT CAL 1 screen andwith CG1 or CG2 exposed to atmosphere, use the UP or DOWN keys to adjust theanalog output to match the corresponding pressure displayed on CG1 or CG2
pressure measurement display.

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The VGC083CANALOG OUTPUT 1 is programmed for "CG1 1 - 8V". The VGC083
CG1 display is registering a pressure reading of 7.60E+02 Torr. Based on theequation and table given in section 7.7 the expected analog output at 7.60E+02
Torr is 7.881 V. Use the UP or DOWN keys in the AOUT CAL 1 screen to set theanalog output to 7.881 V as recorded by your voltmeter. Alternatively, if the CG1
analog output is used to display the CG1 pressure on your PLC or system display
console, simply adjust the AOUT CAL 1 while the gauge is exposed to atmosphereso that the CG1 atmospheric pressure displayed by your PLC matches the CG1
atmospheric pressure displayed by the VGC083C. The AOUT CAL can be performed at any pressure between 400 Torr to 999 Torr (atmosphere recommended).
Note - As you adjust the analog output, the number being displayed in the AOUT
35

CAL 1 screen represents the millivolts offset from zero volts that is being usedinternally for the analog output gain adjustment.
To perform AOUT CAL 1 adjustment if ANALOG OUTPUT 1 is programmed for
ALT LINEAR: Connect the CDG to the VGC083C and connect the VGC083C
analog output 1 to a high resolution voltmeter, your system, PLC, etc. While in the
AOUT CAL 1 screen and with the 1000 TORR CDG exposed to atmosphere, use
the UP or DOWN keys to adjust the analog output to match the corresponding
pressure displayed for the alternate gauge (CG2/ALT display channel).
Example: The VGC083C ANALOG OUTPUT 1 is programmed for "ALT LINEAR"
and a 1000 TORR CDG is connected to the VGC083C. The VGC083C CG2/ALT
display channel is registering a pressure reading of 7.60E02 Torr. For a 1000
TORR CDG with a 0-10 VDC output, the expected analog output at 760 Torr is
7.60 volts. Use the UP or DOWN keys in the AOUT CAL 1 screen to set the analog
output to 7.60 V as recorded by your voltmeter. Alternatively, if the alternate gauge
analog output is used to display the pressure on your PLC or system display
console, simply adjust the AOUT CAL 1 while the gauge is exposed to atmosphereso that the alternate gauge atmospheric pressure displayed by your PLC matches
the atmospheric pressure displayed by the CG2/ALT display channel of the
VGC083C.
For other CDG ranges always use CDG's full scale pressure value to perform
calibration. For example, if you are using a 100 TORR CDG, evacuate your systempressure to 100 Torr and use the same calibration procedure described above.
Note - As you adjust the analog output, the number being displayed in the AOUTCAL 1 screen represents the millivolts offset from zero volts that is being usedinternally for the analog output gain adjustment.

AOUT CAL 2[Factory default = Factory Set]
(Same info as AOUT CAL 1 above, except for AOUT CAL 2)

AOUT CAL 3[Factory default = Factory Set]
(Same info as AOUT CAL 1 above, except for AOUT CAL 3)

AOUT LIN 1[Factory default = 1.00E00 TORR]
This programming parameter is only used if you have assigned IG LINEAR, CG1
LINEAR or CG2 LINEAR to ANALOG OUTPUT 1 above. This analog output typeprovides a 0-10 Vdc output signal that has a direct linear relationship to the displayed pressure measured by the IG, CG1 or CG2. The AOUT LIN 1 value programmed here represents the maximum pressure as measured by the IG, CG1 or
CG2 corresponding to a voltage output of 10 volts. This selection covers, at most, a
3 decade range of pressure.
For example, if AOUT LIN 1 is programmed for 1.00E-03 Torr, then the instrument
provides a 10 volt analog output signal when pressure is at 1.00E-03 Torr. Thereafter, minimum pressure is automatically set to 1.00E-06 Torr, with a corresponding
minimum voltage output of 0.01 volts. If your application requires the IG, CG1 or
CG2 analog output voltage to cover a pressure range exceeding three decades,
then consider using the log-linear analog outputs. Refer to section 7.6 and section
7.10 for details regarding this type of output signal.

AOUT LIN 2[Factory default = 1.00E00 TORR](Same info as AOUT LIN 1 above, except for AOUT LIN 2)

AOUT LIN 3[Factory default = 1.00E00 TORR](Same info as AOUT LIN 1 above, except for AOUT LIN 3)

6.5.6 SERIAL COMM

36

The VGC083C provides both RS232 and RS485 serial communications. Press the
ENTER key to access the SERIAL COMM menu for configuring the serial communications.

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COMM TYPE

[Factory default = RS485]
The VGC083C supports four different protocols listed below (See section 9 fordetails).

BAUDRATE•

RS485

RS485 with start and stop characters and address, derived fromINFICON BAG302

•

RS232

RS232 with start and stop characters, like RS485 above but
no address

•

GP485

RS485 compatible with Granville-Phillips 307 and 358 controllers

•

GP232

RS232 compatible with Granville-Phillips 307 and 358 controllers[Factory default = 19200]
This sets the baud rate for the RS485 and the RS232 serial communications. The
baud rate can be set to various values listed below.

FRAMING•

38400 BAUD•

19200 BAUD•

9600 BAUD•

4800 BAUD•

2400 BAUD•

1200 BAUD•

600 BAUD•

300 BAUD[Factory default = 8 BITS, NONE 1]
This sets the character framing by providing the user various selections to control
the number of characters, parity and number of stop bits. Character framing can be
set to one of the following.

ADDRESS•

8 BITS NONE 1 (This selection sets the character framing to 8 data bits, noparity, 1 stop bit)•

7 BITS ODD 2•

7 BITS EVEN 2•

7 BITS ODD 1•

7 BITS EVEN 1•

8 BITS ODD 1•

8 BITS EVEN 1[Factory default = 01]
This sets the two byte RS485 device address. For example, an ADDRESS of 05
will make the address 0x05 in hexadecimal. An address of 15 will set the
ADDRESS to 0x15 in hexadecimal.

6.5.7 DISPLAY

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The DISPLAY menu allows the user to configure the OLED setup screen. The user
can configure the set-up screen to normal or research mode for IG, enable or disable screen saver and adjust the display intensity. Press the ENTER key to accessthe DISPLAY menu for configuring the setup screen.

37

SCREEN SETUP[Factory default = NORMAL]
This menu configures the display mode for the setup screen. The setup screen canbe configured to display the IG parameters in NORMAL or RESEARCH mode. Use
the UP and DOWN keys to select the desired setup screen mode from thefollowing menu choices.
•

NORMAL

Normal display mode for IG•

RESEARCH

Research display mode for IG

Select "NORMAL" if you would like to configure the setup screen to display the IG
parameters in the normal mode shown below.

Select "RESEARCH" if you would like to configure the setup screen to display theIG parameters in the research mode shown below. This is particularly helpful whentroubleshooting IG issues.

SCREEN SAVER[Factory default = ON]
The VGC083C set-up screen uses an OLED type display which over an extended
period of time can start to show divergence between pixels that are on at all times
verses pixels that are not. This could result in pixels exhibiting a burned-in effect.
To minimize the burned-in effect, a screen saver function can be activated by programming the SCREEN SAVER menu selection to ON. With the screen saver function turned on, the setup screen changes display appearance every 12 hours. The
display will appear in the normal mode with a dark background color for the first
12 hours and will then switch to a back-lit background color for the next 12 hours. If
you like to have the 12 hour period for the normal display mode to start at a specifictime of the day, simply access the SCREEN SAVER menu and change setting to
OFF and then ON again. This initiates the screen saver function immediately.

NOTE

BRIGHTNESS

To increase longevity of the OLED display, INFICON recommends that the screen
saver function remains ON as shipped from the factory.
[Factory default = 0]
The BRIGHTNESS menu allows the user to select the brightness of the setup
screen display. The brightness setting of 0 provides the lowest brightness (contrast) and 10 the highest.

NOTE

LED BRIGHTNESS

To increase longevity of the OLED display, INFICON recommends that the brightness function remains at 0 as shipped from the factory.
[Factory default = 8]
Depending on the age of your controller this LED BRIGHTNESS menu may not be
available in your product. The LED BRIGHTNESS menu allows the user to selectthe brightness of the three channel pressure measurement LED displays. The
brightness setting of 0 provides the lowest brightness (contrast) and 10 the highest.

38

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7 Analog Output Charts & Equations (Nitrogen/Air Only)
This section provides various charts & equations for analog outputs available fromthe VGC083C.

7.1 Analog Output wide
range measurement for
IG - CG1 0.5 - 7V
(Nitrogen / Air only)

When the analog output is setup, as described in section 6.5.6 for IG - CG1 / CG2 /ALT 0.5-7V, the analog output voltage represents a combination of the IG and CG1or IG and CG2 or IG and ALT gaue for wide range measurements. Refer to section
8.3.2 if you are using a gas other than nitrogen/air.

Analog output: Wide Range Log-linear 0.5 to 7 V (dc), 0.5 V per decadeA) The log-linear output signal and pressure are relatedby the following formulas when units of measurement isin Torr and mbar:(volts - 5.5)/(0.5)
V = ((0.5 × log10(P)) + 5.5
P = 10
Where P is the pressure in Torr or mbar, and V is theoutput signal in volts.
B) The log-linear output signal and pressure are relatedby the following formulas when units of measurement isin pascals:(volts - 4.5)/(0.5)
V = ((0.5 × log10(P)) + 4.5
P = 10
Where P is the pressure in pascals, and V is the output
signal in volts.
Note: The output voltage will switch to above+11 V (dc) under the following conditions:1) The IG sensor is turned off, any IG fault condition
and the CG1 is damaged or disconnected.
2) The pressure exceeds the value of OVER
PRESSURE menu for MAG050 / MAG060 and CG1 isdamaged or disconnected.
3) Any IG or CG faults condition while operating in the
IG or CG range respectively.

Pressure[Torr]

Voltage[V (dc)]1.00E-10
1.00E-9
1.00E-8
1.00E-7
1.00E-6
1.00E-5
1.00E-4
1.00E-3
1.00E-2
1.00E-1
1.00E+00
1.00E+01
1.00E+02
1.00E+03
see notes

0.5
1.0
1.5
2.0
2.5
3.0
3.5
4.0
4.5
5.0
5.5
6.0
6.5
7.0
≥11

The following chart shows the graphical results of table and formulas above forpressure measurements in Torr. Pressure is plotted on the X-axis with a log scale;the output signal is plotted on the Y-axis on a linear scale.

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7.2 Analog Output for IG
LOG N - 10 (Nitrogen /Air only)

When the analog output is setup, as described in section 6.5.6 for IG LOG N - 10,
the analog output voltage represents the pressured measured by the IG for nitrogen/air only. Refer to section 8.3.1 if you are using a gas other than nitrogen/air.

Analog output: IG Log-linear 0 to 9 V (dc), 1 V per decadeA) The log-linear output signal and pressure are relatedby the following formulas when units of measurement isin Torr and mbar:(volts - 10)
V= log10(P) + 10
P= 10
Where P is the pressure in Torr or mbar, and V is theoutput signal in volts.
B) The log-linear output signal and pressure are relatedby the following formulas when units of measurement isin pascals:(volts - 8)
V= log10(P) + 8
P= 10
Where P is the pressure in pascals, and V is the output
signal in volts.
Note: The output voltage will switch to above+11 V (dc) under the following conditions:

Pressure[Torr]

Voltage[V (dc)]1.00E-10
1.00E-9
1.00E-8
1.00E-7
1.00E-6
1.00E-5
1.00E-4
1.00E-3
1.00E-2
5.00E-2
see notes

0.0
1.0
2.0
3.0
4.0
5.0
6.0
7.0
8.0
8.698
≥11

1) The IG sensor is turned off or any IG fault condition.
The following chart shows the graphical results of table and formulas above formeasurements in Torr. Pressure is plotted on the X-axis with a log scale; the output
signal is plotted on the Y-axis on a linear scale.

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7.3 Analog Output for IG
LOG N - 11 (Nitrogen /Air only)

When the analog output is setup, as described in section 6.5.6 for IG LOG N - 11,
the analog output voltage represents the pressured measured by the IG for nitrogen/air only. Refer to section 8.3.1 if you are using a gas other than nitrogen/air.

Analog output: IG Log-linear 0 to 10 V (dc), 1 V per decadeA) The log-linear output signal and pressure are relatedby the following formulas when units of measurement isin Torr and mbar:(volts - 11)
V= log10(P) + 11
P= 10
Where P is the pressure in Torr or mbar, and V is theoutput signal in volts.
B) The log-linear output signal and pressure are relatedby the following formulas when units of measurement isin pascals:(volts - 9)
V= log10(P) + 9
P= 10
Where P is the pressure in pascals, and V is the output
signal in volts.
Note: The output voltage will switch to above+11 V (dc) under the following conditions:1) The IG sensor is turned off or any IG fault condition.

Pressure[Torr]

Voltage[V (dc)]1.00E-11
1.00E-10
1.00E-9
1.00E-8
1.00E-7
1.00E-6
1.00E-5
1.00E-4
1.00E-3
1.00E-2
5.00E-2
see notes

0.0
1.0
2.0
3.0
4.0
5.0
6.0
7.0
8.0
9.0
9.698
≥11

The following chart shows the graphical results of table and formulas above forpressure measurements in Torr. Pressure is plotted on the X-axis with a log scale;the output signal is plotted on the Y-axis on a linear scale.

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7.4 Analog Output for IG
LOG N - 12 (Nitrogen /Air only)

When the analog output is setup, as described in section 6.5.6 for IG LOG N - 12,
the analog output voltage represents the pressured measured by the IG for nitrogen/air only. Refer to section 8.3.1 if you are using a gas other than nitrogen/air.

Analog output: IG Log-linear 0 to 11 V (dc), 1 V per decadeA) The log-linear output signal and pressure are relatedby the following formulas when units of measurement isin Torr and mbar:(volts - 12)
V= log10(P) + 12
P= 10
Where P is the pressure in Torr or mbar, and V is theoutput signal in volts.
B) The log-linear output signal and pressure are relatedby the following formulas when units of measurement isin pascals:(volts - 10)
V= log10(P) + 10
P= 10
Where P is the pressure in pascals, and V is the output
signal in volts.
Note: The output voltage will switch to above+11 V (dc) under the following conditions:1) The IG sensor is turned off or any IG fault condition.

Pressure[Torr]

Voltage[V (dc)]1.00E-12
1.00E-11
1.00E-10
1.00E-9
1.00E-8
1.00E-7
1.00E-6
1.00E-5
1.00E-4
1.00E-3
1.00E-2
5.00E-2
see notes

0.0
1.0
2.0
3.0
4.0
5.0
6.0
7.0
8.0
9.0
10.0
10.698≥11

The following chart shows the graphical results of table and formulas above forpressure measurements in Torr. Pressure is plotted on the X-axis with a log scale;the output signal is plotted on the Y-axis on a linear scale.

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7.5 Analog Output for IG 1.8- 8.7 V (Nitrogen / Air
only)

When the analog output is setup, as described in section 6.5.6, for IG 1.8 – 8.7V,
the analog output voltage represents the pressured measured by the IG for nitrogen/air only. Refer to section 8.3.1 if you are using a gas other than nitrogen/air.

Analog output: IG Log-linear 0 to 9.259 Vdc, 0.8 V per decade
The log-linear output signal and pressure are related by thefollowing formulas:((1.25* volts) - 12.875)
V= 10.3 + (0.8)×log10(P)P (Torr)= 10((1.25*volts) - 12.75)
P (mbar)= 10
V= 10.2 + (0.8)×log10(P)((1.25*volts) - 10.75)
P (pascals) = 10
V= 8.6 + (0.8)×log10(P)Where P is the pressure and V is the output signal in volts.
Note: The output voltage will switch to above +11 V (dc)under the following conditions:1) The IG sensor is turned off or any IG fault condition.

Pressure[Torr]

Voltage[V (dc)]2.00E-11
4.20E-11
7.50E-10
1.30E-8
2.40E-7
4.20E-6
7.50E-5
1.30E-3
5.00E-2
filament is
OFF

1.741
2.0
3.0
4.0
5.0
6.0
7.0
8.0
9.698
≥11

The following chart shows the graphical results of table and formulas above forpressure measurements in Torr. Pressure is plotted on the X-axis with a log scale;the output signal is plotted on the Y-axis on a linear scale.

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7.6 Analog Output for IG
LINEAR (Nitrogen / Air
only)

When the analog output is setup, as described in section 6.5.6, for IG LINEAR, theanalog output voltage represents the pressure measured by the IG for nitrogen/air
only. The Linear analog output type provides a 0-10 V (dc) output signal that has adirect linear relationship to the displayed pressure measured by the ion gauge only.
This selection covers 3 decades of pressure change. For example, if ANALOG
OUT 1 is programmed for IG LINEAR and the maximum pressure for AOUT LIN 1
selected is 1.00E-03 Torr, then the instrument provides a 10 volt analog output signal when pressure as measured by IG is at 1.00E-03 Torr. Furthermore, the minimum pressure is automatically set to 1.00E-06 Torr, with a corresponding minimum
voltage output of 0.01 volts.
Constructing a table of these parameters may be useful in documenting the relationship of displayed pressure (measured by the IG) to the analog output voltage.
The following table is representative of a typical setup where the IG may be used ina limited range of pressure measurement where a direct linear relationship exists
between the displayed pressure (mantissa) and the analog output signal.
Linear Analog Output Voltage - volts

Measured (Displayed) Pressure - Torr

0.01
0.10
1.00
10.00

1.00E-06
1.00E-05
1.00E-04
1.00E-03

If your application requires the analog output voltage to cover a pressure range
exceeding three decades, then consider using a log-linear analog output type for
the IG.

NOTE

The information discussed above regarding the Linear IG analog output applies
only to N2 / air. If you are using a gas other than N2 / air, refer to section 8.3.1 tooptain the true pressure of the specific gas in your vacuum chamber.
Note: The output voltage will switch to above +11 V (dc) under the following
conditions:1) The IG sensor is turned off or any IG fault condition.

7.7 Analog Output for CG1or CG2 1 - 8 V (Nitrogen/ Air only)

When the analog output is setup, as described in section 6.5.6, for CG1 1 – 8 V or
CG2 1 – 8 V, the analog output voltage represents the pressure measured by CG1or CG2 for nitrogen/air only. Refer to section 8.3.3.1 if you are using a gas otherthan nitrogen/air.

Analog output: Convection Gauge Log-linear 1 to 8 V (dc), 1 V per decadeA) The log-linear output signal and pressure are related by the following formulas
when units of measurement is in Torr and mbar:(volts - 5)
V = log10(P) + 5
P = 10
Where P is the pressure in Torr or mbar, and V is the output signal in volts.
The output voltage is 1 V when pressure is at 1.00E-04 Torr.
The output voltage is 8 V when pressure is at 1.00E+03 Torr.
B) The log-linear output signal and pressure are related by the following formulas
when units of measurement is in pascals:(volts - 3)
V = log10(P) + 3
P = 10
Where P is the pressure in pascals, and V is the output signal in volts.

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Note: An analog output of above +11 volts indicates a faulty convection
gauge or unplugged gauge cable.
Pressure[Torr]

Voltage[V]

Pressure[Torr]

Voltage[V]

Pressure[Torr]

Voltage[V]

1.00E-04
2.00E-04
5.00E-04
1.00E-03
2.00E-03
5.00E-03
1.00E-02
2.00E-02
5.00E-02
1.00E-01

1.000
1.301
1.699
2.000
2.301
2.699
3.000
3.301
3.699
4.000

2.00E-01
5.00E-01
1.00E+00
2.00E+00
5.00E+00
1.00E+01
2.00E+01
5.00E+01
1.00E+02
2.00E+02

4.301
4.699
5.000
5.301
5.699
6.000
6.301
6.699
7.000
7.301

3.00E+02
4.00E+02
5.00E+02
6.00E+02
7.00E+02
7.60E+02
8.00E+02
9.00E+02
1.00E+03

7.477
7.602
7.699
7.778
7.845
7.881
7.903
7.954
8.000

The following chart shows the graphical results of table and formulas above forpressure measurements in Torr.

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7.8 Analog Output for CG1or CG2 0 - 7 V (Nitrogen/ Air only)

When the analog output is setup, as described in section 6.5.6, for CG1 0 – 7 V or
CG2 0 – 7 V, the analog output voltage represents the pressure measured by CG1or CG2 for nitrogen/air only. Refer to section 8.3.3.2 if you are using a gas otherthan nitrogen/air.

Analog output: Convection Gauge Log-linear 0 to 7 V (dc), 1 V per decadeA) The log-linear output signal and pressure are related by the following formulas
when units of measurement is in Torr and mbar:(volts - 4)
V = log10(P) + 4
P = 10
Where P is the pressure in Torr or mbar, and V is the output signal in volts.
The output voltage is 0 V when pressure is at 1.00E-04 Torr.
The output voltage is 7 V when pressure is at 1.00E+03 Torr.
B) The log-linear output signal and pressure are related by the following formulas
when units of measurement is in pascals:(volts - 2)
V = log10(P) + 2
P = 10
Where P is the pressure in pascals, and V is the output signal in volts.
Note: An analog output of above +11 volts indicates a faulty convection
gauge or unplugged gauge cable.
Pressure[Torr]

Voltage[V]

Pressure[Torr]

Voltage[V]

Pressure[Torr]

Voltage[V]

1.00E-04
2.00E-04
5.00E-04
1.00E-03
2.00E-03
5.00E-03
1.00E-02
2.00E-02
5.00E-02
1.00E-01

0.000
0.301
0.699
1.000
1.300
1.700
2.000
2.300
2.700
3.000

2.00E-01
5.00E-01
1.00E+00
2.00E+00
5.00E+00
1.00E+01
2.00E+01
5.00E+01
1.00E+02
2.00E+02

3.300
3.700
4.000
4.300
4.700
5.000
5.300
5.700
6.000
6.300

3.00E+02
4.00E+02
5.00E+02
6.00E+02
7.00E+02
7.60E+02
8.00E+02
9.00E+02
1.00E+03

6.480
6.600
6.700
6.780
6.850
6.880
6.900
6.950
7.000

The following chart shows the graphical results of table and formulas above formeasurements in Torr.

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7.9 Analog Output for CG1or CG2 NON - LIN(Nitrogen / Air only)

When the analog output is setup, as described in section 6.5.6, for CG1 NON - LIN
or CG2 NON - LIN, the analog output voltage represents the pressure measured by
CG1 or CG2 for nitrogen/air only. Refer to section 8.3.3.3 if you are using a gas
other than nitrogen/air.
®
The first convection enhanced pirani head introduced was the Convectron . The
controller for the Convectron® provided an analog output signal referred to as the"S-curve" which represented the actual voltage applied across the head circuit,proportional to the pressure inside the pressure head enclosure. The Granville®
®
Phillips Convectron controllers were designed to output this head voltage and inlater years, the non-linear voltage applied to the head was scaled to provide
various signal spans of the original "S-curve". The non-linear analog output of the
VGC083C duplicates the original S-curve of 0.375 volts at pressure less than
-4
1.00 × 10 Torr to 5.659 volts at 1000 Torr, nitrogen or air.
In general, one may use linear interpolation techniques to calculate
the pressure using the non-linear
analog output voltage measured ata specific pressure. You may also
calculate the N2/air pressure represented by the non-linear analog
output voltage for the original "Sthcurve" using a multi-segment, norder polynomial function calculation listed on the following page.

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Pressure[Torr]

Voltage[V]

Pressure[Torr]

Voltage[V]

Pressure[Torr]

Voltage[V]

0.000
1.00E-04
2.00E-04
5.00E-04
1.00E-03
2.00E-03
5.00E-03
1.00E-02
2.00E-02
5.00E-02

0.37510.37590.37680.37950.38400.39270.41740.45550.5226
0.68191.00E-01
2.00E-01
5.00E-01
1.00E+00
2.00E+00
5.00E+00
1.00E+01
2.00E+01
5.00E+01
1.00E+02

0.87801.1552
1.6833
2.21682.84183.67534.2056
4.57664.84644.94492.00E+02
3.00E+02
4.00E+02
5.00E+02
6.00E+02
7.00E+02
7.60E+02
8.00E+02
9.00E+02
1.00E+03

5.01905.11115.22365.32945.41945.49495.53405.55815.61415.6593Note - An analog output of above +11 volts indicates a faulty convection
gauge or unplugged gauge cable.
The equations and coefficients for the nth order polynomial equation defined forvarious pressure measurement ranges for the Non-linear analog output (S-curve)
for CG1 or CG2 for N2/air described above are given in the following table:
For 0 mTorr to about 2 Torr, the Non-Linear Analog Output voltage range of
0.375 to 2.842 volts, use this table.
2

3

4

5

Coefficients for y(x) = a + bx + cx + dx + ex +fx
a-0.02585b

0.03767c

0.04563d0.1151e-0.04158f

0.008738

For 2 Torr to about 100 Torr, the Non-Linear Analog Output voltage range of
2.842 to 4.945 volts, use this table.
Coefficients for 𝑦𝑦(𝑥𝑥) =a

𝑎𝑎+𝑐𝑐𝑐𝑐+𝑒𝑒𝑥𝑥 2

1+𝑏𝑏𝑏𝑏+𝑑𝑑𝑥𝑥 2 +𝑓𝑓𝑥𝑥 30.1031b-0.3986c-0.02322d0.07438e

0.07229f-0.006866

For 100 Torr to 1000 Torr, the Non-Linear Analog Output voltage range of 4.94 to
5.659 volts, use this table.

ab

Coefficients for 𝑦𝑦(𝑥𝑥) =cdWhere y(x) = pressure in Torr,𝑎𝑎+𝑐𝑐𝑐𝑐

1+𝑏𝑏𝑏𝑏+𝑑𝑑𝑥𝑥 2

100.624-0.37679-20.5623

0.0348656
x= measured analog output in volts

Example: Measured analog output voltage is 0.3840 V.
From first table shown above use equation:
2345y(x) = a + bx + cx + dx + ex +fx
x = 0.3840 voltsa = -0.02585, b=0.03767, c=0.04563, d=0.1151, e=-0.04158,
y(x) = Pressure = 1.0E-03 Torr48

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7.10 Analog Output for CG1or CG2 LINEAR(Nitrogen / Air only)

When the analog output is setup, as described in section 6.5.5 , for CG1 LINEAR
or CG2 LINEAR, the analog output voltage represents the pressure measured by
the CG1 or CG2 for nitrogen/air only. The Linear analog output type provides a0-10 V (dc) output signal that has a direct linear relationship to the displayed pressure measured by the CG1 or CG2 only. This selection covers 3 decades of pressure change. For example, if ANALOG OUT 1 is programmed for CG1 LINEAR
and the maximum pressure for AOUT LIN 1 selected is 1.00 Torr, then the instruments provides a 10 volt analog output signal when pressure as measured by CG1
is at 1.00 Torr. Furthermore, the minimum pressure is automatically set to
1.00E-03 Torr, with a corresponding minimum voltage output of 0.01 volts.
Constructing a table of these parameters may be useful in documenting the relationship of displayed pressure (measured by the IG) to the analog output voltage.
The following table is representative of a typical setup where the CG may be used
in a limited range of pressure measurement where a direct linear relationship exists
between the displayed pressure (mantissa) and the analog output signal.
Linear Analog Output Voltage - volts

Measured (Displayed) Pressure - Torr

0.01
0.10
1.00
10.00

1.00E-03
1.00E-02
1.00E-01
1.00E+00

If your application requires the analog output voltage to cover a pressure range
exceeding three decades, then consider using a log-linear analog output type for
CG1 or CG2.
Note - An analog output of above +11 volts indicates a faulty convection
gauge or unplugged gauge cable.

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8 Using the Gauge with Different Gases
The following tables and explanation contain important information regarding theuse of ionization and convection gauges when used to measure pressure of gases
other than nitrogen /air. For both types of gauge heads, corrections must be
applied to both the display and analog outputs. This is particularly critical whenusing convection gauges at higher pressures than measured by the ion gauge
when using gases other than N2/air.

8.1 Ion Gauge Display
Correction Factors for
Selected Gases

The measurement value is gas dependent. The pressure reading applies to dry air,
O2, CO and N2. For other gases, the measurements have to be corrected. There
are two methods that can be used for monitoring the IG display when using gases
other than nitrogen/air:
1) If you are using a gas other than N2 / air, you must manually apply a gas
correction factor to the IG displayed measurement. Post a label on your ion gauge
display showing the correction factor to be used for the pressure of the gas type
you are measuring. The table below provides typical correction factors (k) for cold
cathode ion gauges when used with various gas. To correct the display measurements, multiply the displayed measured pressure by the correction factor forthe gas type you are measuring:
Indicated pressure (gauge calibrated for air/N2)-5

In the range below 10 Torr the pressure indication is linear. For gases other thanair / N2, the pressure can be determined by means of the following conversion
formula:peff = K × indicated pressure
where:
Gas typeK

Gas type

K

Air (N2, O2, CO)
Xe
Kr
Ar

1.0
0.4
0.5
0.8

H2
Ne
He

2.4
4.1
5,9

These gas correction factors are average values.
50

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ExampleIf the gas in use is argon (Ar) and the VGC083C controller indicates a measured
pressure of 7.6 x 10-6 Torr:-6-7peff = 0.8 × 7.60 × 10 = 6.08 × 10 Torr true pressure of argon gas

NOTE

Cold cathode gauges exhibit a non-linear response in the pressure range of-4
1×10 Tor and higher. This non-liner response is corrected in the controller firmware and calibration for air/N2. Since this internal correction is applicable to air/N2
only, it is recommended to use the pressure measurements from the convection-4gauge when operating in the pressure range of 1×10 Tor and higher for othergases. With both cold cathode and convection gauges the appropriate gas correction factors must be applied.
2) Alternatively, you may correct the display for a direct reading of pressure for thetype of gas you are using by adjusting the sensitivity value for the IG. If you adjust
the sensitivity value of your ion gauge to compensate the readout of pressure for agas type other than nitrogen / air, the displayed pressure readout for that device
must be annotated to indicate that the displayed pressure is for the gas type thereadout is compensated for.
In the above example, if the sensitivity value of the cold cathode ion gauge being-1
used is 10 Torr ("10 per Torr"), the sensitivity value can be programmed to12.5 (10/0.8 =12.5) so that the pressure readout would directly indicate the truepressure of argon. Again, the display line for that particular device pressure readout would require annotation (a user applied label) so as to not conflict with the gas
type selection/notation of nitrogen (N2). See Note above for pressure measure-4
ments of 1×10 Tor and higher when using the cold cathode with gases other thanair/N2.

8.2 Effects of Different
Gases on Convection
Gauge Display

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Convection gauge operation is based on the physical effect of thermal conductivityof the gas inside the gauge head. The convection gauge senses heat loss in asensor wire. This heat loss depends on the thermal conductivity of the gas surrounding the sensor wire. Since different gases, and mixtures, have different thermal conductivities, the indicated pressure readings and outputs will also be different. INFICON convection gauges (and most other thermal, heat loss type gauges)
are normally calibrated using nitrogen. When a gas other than N2 is used, correction must be made for the difference in thermal conductivity between N2 and thegas in use. The charts and tables below indicate how different gases affect the display from an INFICON convection gauge.
For nitrogen gas (N2) the calibration of the convection gauge shows excellent-4agreement between indicated and true pressure throughout the range from 10 to1000 Torr. At pressures below about 1 Torr, the calibration curves for the different
gases are similar. The difference in readings (between indicated and true pressure)at these low pressures is usually a constant; a function of the difference between
thermal conductivities of the gases.
At pressures above about 1 Torr, indicated pressure readings may diverge signifycantly from true pressure. At these higher pressures, convection currents in thegauge become the predominant cause of heat loss from the sensor. Calibrationand performance at pressures higher than about 1 Torr depends on gauge tube
geometry and mounting orientation as well as gas properties.
Generally, air and N2 are considered the same as far as thermal conductivity goes,but even these two gases will exhibit slight differences in readings at higher pressures. For example, when venting a system to atmosphere using N2, you may see
readings change by about 30 to 40 Torr after the chamber is opened and air gradually displaces the N2 in the gauge. This is due to the partial pressure of oxygen (O2)contained in atmospheric air.

51

The Y- axis of the above chart is actual pressure as measured by a capacitancemanometer, a diaphragm gauge that measures true total pressure independent ofgas composition. The X-axis is the pressure reading indicated by the convection
gauge under test. This chart shows readings for an INFICON convection gauge®
®
(CVG) and Granville-Phillips Convectron gauge to illustrate that the difference inthe response for both of these types of gauges is virtually indistinguishable.

CAUTION!

52

Do not assume this data applies to other convection gauges which may or may not
be the same. See Table 1 below and note the following examples:

Example A

If the gas is nitrogen (N2), when the true total pressure is 500 Torr, the gauge will
read 500 Torr.

Example B

If the gas is argon (Ar), when the true pressure is 100 Torr, the gauge will readabout 9 Torr.
If you are backfilling your vacuum system with Ar, when your system reaches apressure of 760 Torr true pressure your gauge will be reading about 23 Torr. Continuing to backfill your system, attempting to increase the reading up to 760 Torr,you will over pressurize your chamber which may present a hazard.

Example C

If the gas is helium (He), the gauge will read 1.10E+03 (overpressure indication)
Torr when pressure reaches about 10 Torr true pressure and opening the chamber
to atmosphere prematurely may present other hazards for both people andproduct. You probably will not cause damage to your vacuum system, but opening
the chamber to atmosphere with the internal chamber pressure at only 10 Torr truepressure, may present other hazards for both personnel in the proximity andproduct that may be inside the chamber/vessel.

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CAUTION!

What these examples illustrate is that using gases other than nitrogen (N2) without
using accurate gas conversion data and other proper precautions could result ininjury to personnel and/or damage to equipment.
Suggested precautions when using gases other than N2:

CAUTION!

CAUTION!

WARNING!

•

Install a pressure relief valve or burst disk on your chamber to provide protection from the dangers associated with over pressurizing the chamber.

•

Post a warning label on your gauge readout such as "Do Not Exceed_______ Torr Indicated Pressure" (fill in the blank for the gas type you areusing) so that an operator using the vacuum chamber system and connectedgauge will not exceed a safe operating pressure.

Do not assume this data applies to other convection gauges, which may or
may not be the same.

Risk of over pressurizing a gas containment vessel and attached apparatus
exists when using pressure measurement devices that are calibrated for a specificgas type. Use a pressure relief device to safely limit the internal pressure of acontainment vessel to less than the maximum allowable working pressure rating forthe vacuum/pressure system and all devices attached to the system.

Using a thermal conductivity gauge with gases other than that for which it iscalibrated could result in death or serious injury. Be sure to use gas correction datain this manual when measuring pressures of gases other than N2 / air.

Exercise caution when admitting positive pressures (above local ambient, atmospheric pressure) of gas into any enclosed volume. Install pressure relief devices on
your vacuum / pressure vessel or chamber to limit the maximum allowable working
pressure inside the devices and vessel internal volume to less than the lowest
rated device - in some cases, the maximum allowable working pressure may be
dictated by the type of connections or fittings used to attach devices to your chamber. An O-ring compression fitting type device may be forcibly released (ejected)
from the fitting if internal pressure exceeds the local barometric, ambient pressure.

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53

The table below shows the convection gauge displayed readings at variouspressures for several commonly used gas types:
True
Pressure(Torr)

N2

Ar

He

O2

CO2

Kr

1.00E-4

1.00E-4

1.00E-4

1.00E-4

1.00E-4

1.00E-4

1.00E-4

1.00E-4

2.00E-4

2.00E-4

2.00E-4

2.00E-4

2.00E-4

2.00E-4

2.00E-4

5.00E-4

5.00E-4

5.00E-4

5.00E-4

5.00E-4

5.00E-4

3.00E-4

1.00E-3

1.00E-3

7.00E-4

8.00E-4

1.00E-3

1.10E-3

2.00E-3

2.00E-3

1.40E-3

1.60E-3

2.00E-3

5.00E-3

5.00E-3

3.30E-3

4.00E-3

1.00E-2

1.00E-2

6.60E-3

8.10E-3

2.00E-2

2.00E-2

1.31E-2

5.00E-2

5.00E-2

1.00E-1
2.00E-1

Freon12 Freon22

D2

Ne

CH4

1.00E-4

1.00E-4

1.00E-4

1.00E-4

2.00E-4

2.00E-4

2.00E-4

2.00E-4

2.00E-4

5.00E-4

5.00E-4

5.00E-4

5.00E-4

5.00E-4

4.00E-4

1.50E-3

1.50E-3

1.30E-3

7.00E-4

1.70E-3

2.30E-3

1.00E-3

3.10E-3

3.10E-3

2.40E-3

1.50E-3

3.30E-3

5.00E-3

4.40E-3

2.30E-3

7.60E-3

7.00E-3

6.00E-3

3.50E-3

7.70E-3

9.70E-3

1.10E-2

4.80E-3

1.47E-2

1.35E-2

1.21E-2

7.10E-3

1.53E-2

1.61E-2

1.98E-2

2.22E-2

9.50E-3

2.99E-2

2.72E-2

2.43E-2

1.41E-2

3.04E-2

3.24E-2

4.05E-2

4.92E-2

5.49E-2

2.35E-2

7.25E-2

6.90E-2

6.00E-2

3.48E-2

7.72E-2

1.00E-1

6.43E-2

8.20E-2

9.72E-2

1.07E-1

4.68E-2

1.43E-1

1.36E-1

1.21E-1

7.00E-2

1.59E-1

2.00E-1

1.26E-1

1.65E-1

1.94E-1

2.10E-1

9.11E-2

2.75E-1

2.62E-1

2.50E-1

1.41E-1

3.15E-1

5.00E-1

5.00E-1

3.12E-1

4.35E-1

4.86E-1

4.89E-1

2.17E-1

6.11E-1

5.94E-1

6.87E-1

3.59E-1

7.81E-1

1.00E+0

1.00E+0

6.00E-1

9.40E-1

9.70E-1

9.50E-1

4.00E-1

1.05E+0

1.04E+0

1.55E+0

7.45E-1

1.60E+0

2.00E+0

2.00E+0

1.14E+0

2.22E+0

1.94E+0

1.71E+0

7.00E-1

1.62E+0

1.66E+0

4.13E+0

1.59E+0

3.33E+0

5.00E+0

5.00E+02.45E+0

1.35E+1

4.98E+0

3.34E+0

1.28E+02.45E+0

2.62E+0

2.46E+2

5.24E+0

7.53E+0

1.00E+1

1.00E+1

4.00E+0OP

1.03E+1

4.97E+0

1.78E+0

2.96E+0

3.39E+0OP

2.15E+1

2.79E+1

2.00E+1

2.00E+1

5.80E+0OP

2.23E+1

6.59E+0

2.29E+0

3.32E+0

3.72E+0OP

5.84E+2

3.55E+2

5.00E+1

5.00E+1

7.85E+0OP

7.76E+1

8.22E+0

2.57E+0

3.79E+0

4.14E+0OPOP

8.42E+2

1.00E+2

1.00E+2

8.83E+0OP

2.09E+2

9.25E+02.74E+0

4.68E+0

4.91E+0

OP

OP

OP

2.00E+2

2.00E+2

9.79E+0OP

2.95E+2

1.23E+1

3.32E+0

5.99E+0

6.42E+0

OP

OP

OP

3.00E+2

3.00E+2

1.13E+1OP

3.80E+2

1.69E+1

3.59E+0

6.89E+0

7.52E+0

OP

OP

OP

4.00E+2

4.00E+2

1.35E+1

OP

4.85E+2

2.24E+1

3.94E+0

7.63E+08.42E+0

OP

OP

OP

5.00E+2

5.00E+2

1.61E+1

OP

6.04E+2

2.87E+1

4.21E+0

8.28E+0

9.21E+0

OP

OP

OP

6.00E+2

6.00E+2

1.88E+1

OP

7.30E+2

3.64E+1

4.44E+0

8.86E+0

9.95E+0

OP

OP

OP

7.00E+2

7.00E+2

2.18E+1

OP

8.59E+2

4.61E+1

4.65E+09.42E+0

1.07E+1

OP

OP

OP

7.60E+2

7.60E+2

2.37E+1

OP

9.41E+2

5.39E+1

4.75E+0

9.76E+0

1.11E+1

OP

OP

OP

8.00E+2

8.00E+2

2.51E+1

OP

9.97E+2

5.94E+1

4.84E+0

9.95E+0

1.14E+1

OP

OP

OP

9.00E+2

9.00E+2

2.85E+1

OPOP

7.95E+1

4.99E+0

1.05E+1

1.20E+1

OP

OP

OP

1.00E+3

1.00E+3

3.25E+1OPOP

1.11E+2

5.08E+0

1.11E+1

1.27E+1

OP

OP

OP

Values listed under each gas type are in Torr units
Over Pressure (OP)= 1.10E+03 Torr
When using gases other than nitrogen/air, you must use the above look-up table todetermine the true pressures of selected gases as measured by convection
gauges. For example, if the gas you are using in your vacuum system chamber ispredominately argon (Ar), a displayed pressure of 1.14E+00 Torr means the actual
true pressure of argon is 2.00E+00 Torr based on the conversion information provided in the above table.
Example: If the gas is argon (Ar), when the true pressure is 100 Torr, the gauge will
read only about 9 Torr.

54

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8.3 Effects of Different
Gases on Analog Output

The following tables and explanation contains important information regarding theuse of ionization and convection gauges on gases other than N2 / Air. For bothtypes of gauges, corrections must be applied to the analog outputs.

8.3.1 Ion Gauge Analog Output
Correction Factors for
Selected Gases

When using any of the analog outputs assigned to ion gauge only, use thefollowing steps to convert the analog output to pressure: Ion gauge analog output
correction factors for selected gases:A) Refer to section 7 and use the related equation to convert the voltage in yourreceiving instrument to pressure. This pressure value is based on nitrogen gas.
B) Apply the Gas Correction Factor for the particular gas you are using to thepressure value obtained in step A. Use correction factors and example listed
below:-5

In the range below 10 Torr the pressure indication is linear. For gases other thanair / N2, the pressure can be determined by means of the following conversion
formula:peff = K × indicated pressure
where:
Gas typeK

Gas type

K

Air (N2, O2, CO)
Xe
Kr
Ar

1.0
0.4
0.5
0.8

H2
Ne
He

2.4
4.1
5,9

These gas correction factors are average values.

ExampleANALOG OUT 1 selected is IG LOG N-10. The gas in use is argon. Voltage output
is 4 volts. Pressure unit is Torr.
(volts - 10)
p (nitrogen) = 10
(4 - 10)
p = 10-6
p = 1.00 × 10 Torr (based on nitrogen)
Applying the Gas Correction Factor of 0.8 for argon listed in the table above,-6-7
p (argon) = 0.8 × 1 × 10 = 8 × 10 Torr true pressure of argon gas

NOTE

8.3.2 IG - CG1 0.5 - 7V Analog
Output Correction
Factors for Selected
Gases

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Cold cathode gauges exhibit a non-linear response in the pressure range of-4
1×10 Tor and higher. This non-liner response is corrected in the controller firmware and calibration for air/N2. Since this internal correction is applicable to air/N2
only, it is recommended to use the pressure measurements from the convection-4gauge when operating in the pressure range of 1×10 Tor and higher for othergases.With both cold cathode and convection gauges the appropriate gas correction factors must be applied.

When using the IG - CG1 or IG - CG2 analog output mode (Log-Linear 0.5 - 7 V,
0.5 V/decade) for gases other than air/N2, the analog output is interpreted differently over two different pressure ranges as discussed below:A) Pressure range from high vacuum to the OVER PRESSURE value
programmed in the VGC083C (cold cathode ion gauge range):
Use the correction factors listed in section 8.3.2.1 below to determine pressure
from the voltage for selected gases (ion gauge range). As discussed previously
cold cathode gauges exhibit a non-linear response in the pressure range of-4
1×10 Tor and higher. This non-liner response is corrected in the controller firmware and calibration for air/N2. Since this internal correction is applicable to air/N2
only, it is recommended to use the pressure measurements from the convection-4gauge when operating in the pressure range of 1×10 Tor and higher for othergases. However in the analog output combination mode IG - CG1 or IG - CG2, theanalog output is derived from measurements by the cold cathode gauge over the-4pressure range of 1×10 Tor to the OVER PRESSURE shut down value. As such,
we recommend not using the IG - CG1 or IG - CG2 mode when using gases otherthan air/N2. Instead, consider using individual analog outputs for the cold cathode55

and the convection gauge and use the measurements from the convection gauge-4in the range of 1×10 Tor and higher thus disregarding the pressure measure-4
ments from the cold cathode gauge above 1×10 Tor. With both cold cathode andconvection gauges the appropriate gas correction factors must be applied.
B) Pressure range from the ion gauge OVER PRESSURE value programmed inthe VGC083C to 1,000 Torr:
Use the correction factors listed in section 8.3.2.2 below to determine pressure
from the voltage for selected gases (convection gauge range).

8.3.2.1 IG-CG1 0.5 - 7V Analog
Output Correction Factors- Ion Gauge Range

A) When using the IG - CG1 or IG - CG2 analog output mode (Log-Linear 0.5-7 V,
0.5 V/decade) for gases other than air/N2, use the following steps to convert theanalog output to pressure for MAG050/060 when operating from high vacuum tothe to OVER PRESSURE shut down value programmed in the VGC083C.
B) Refer to section 7.1 and related equation to convert the voltage in your receiving instrument to pressure. This pressure value is based on nitrogen.
C) Apply the gas correction factor (k) for the particular gas you are using to thepressure value obtained in step A (Use correction factors and example listed
below).
-5

In the range below 10 Torr the pressure indication is linear. For gases other thanair / N2, the pressure can be determined by means of the following conversion
formula:peff = K × indicated pressure
where:
Gas typeK

Gas type

K

Air (N2, O2, CO)
Xe
Kr
Ar

1.0
0.4
0.5
0.8

H2
Ne
He

2.4
4.1
5,9

These gas correction factors are average values.

ExampleThe gas in use is argon. Output voltage is 3 volts. Pressure unit is Torr.
𝑣𝑣𝑣𝑣𝑣𝑣𝑣𝑣𝑣𝑣−5.5(3.0 – 5.5) / (0.5)

p (nitrogen) = 10 0.5= 10-5
p = 1×10 Torr (based on nitrogen)-5-6p(argon) = 0.8 × 1 × 10 = 8 × 10 Torr true pressure of argon gas
As described in section 8.3.2 cold cathode gauges exhibit a non-linear response in-4
the pressure range of 1×10 Tor and higher. This non-liner response is correctedin the controller firmware and calibration for air/N2. Since this internal correction isapplicable to air/N2 only, it is recommended to use the pressure measurements-4from the convection gauge when operating in the pressure range of 1×10 Tor andhigher for other gases. However in the analog output combination mode IG - CG1
or IG - CG2, the analog output is derived from measurements by the cold cathode-4
gauge over the pressure range of 1×10 Tor to the OVER PRESSURE shut down
value. As such, we recommend not using the IG - CG1 or IG - CG2 mode whenusing gases other than air/N2. Instead, consider using individual analog outputs forthe cold cathode and the convection gauge and use the measurements from the-4
convection gauge in the range of 1×10 Tor and higher thus disregarding the-4pressure measurements from the cold cathode gauge above 1×10 Tor. With bothcold cathode and convection gauges the appropriate gas correction factors must
be applied.

56

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8.3.2.2 IG-CG1 0.5 - 7V Analog
Output Correction Factors- Convection Gauge
Range

When using the IG - CG1 or IG - CG2 analog output mode (Log-Linear 0.5 - 7 V,
0.5 V/decade) for gases other than air/N2, use the following look-up table andinformation to convert the analog output to pressure when operating in the pressure range of overpressure shutdown value listed in section 5.4 to 1000 Torr. The
look-up table has been derived from equation listed in section 7.1.
Analog output IG - CG1 or IG - CG2 when in the pressure range of overpressure
shutdown value to 1000 Torr

True
Pressure(Torr)

N2

Ar

He

O2

CO2

KR

Freon12Freon22

D2

Ne

CH4

1.00E-3

4.000

3.923

3.952

4.000

4.021

3.801

4.088

4.088

4.057

3.923

4.115

2.00E-3

4.151

4.073

4.102

4.151

4.181

4.000

4.246

4.246

4.190

4.088

4.259

5.00E-3

4.349

4.259

4.301

4.349

4.322

4.181

4.440

4.423

4.389

4.272

4.443

1.00E-2

4.500

4.410

4.454

4.493

4.521

4.341

4.584

4.565

4.541

4.426

4.592

2.00E-2

4.651

4.559

4.603

4.648

4.673

4.489

4.738

4.717

4.693

4.575

4.741

5.00E-2

4.849

4.755

4.804

4.846

4.870

4.686

4.930

4.919

4.889

4.771

4.944

1.00E-1

5.000

4.904

4.957

4.994

5.015

4.835

5.078

5.067

5.041

4.923

5.101

2.00E-1

5.151

5.050

5.109

5.144

5.161

4.980

5.220

5.209

5.199

5.075

5.249

5.00E-1

5.349

5.247

5.319

5.343

5.345

5.168

5.393

5.387

5.418

5.278

5.446

1.00E+0

5.500

5.389

5.487

5.493

5.489

5.301

5.511

5.509

5.595

5.436

5.602

2.00E+0

5.651

5.528

5.673

5.644

5.616

5.423

5.605

5.610

5.808

5.601

5.761

5.00E+0

5.849

5.695

6.065

5.849

5.762

5.554

5.695

5.709

6.695

5.860

5.938

1.00E+1

6.000

5.801

6.006

5.848

5.625

5.736

5.765

6.166

6.223

2.00E+1

6.151

5.882

6.174

5.909

5.680

5.761

5.785

6.883

6.775

5.00E+1

6.349

5.947

6.445

5.957

5.705

5.789

5.809

1.00E+2

6.500

5.973

6.660

5.983

5.719

5.835

5.846

2.00E+2

6.651

5.995

6.735

6.045

5.761

5.889

5.904

3.00E+2

6.739

6.027

6.790

6.114

5.778

5.919

5.938

4.00E+2

6.801

6.065

6.843

6.175

5.798

5.941

5.963

5.00E+2

6.849

6.103

6.891

6.229

5.812

5.959

5.982

6.00E+2

6.889

6.137

6.932

6.281

5.824

5.974

5.999

7.00E+2

6.923

6.169

6.967

6.332

5.834

5.987

6.015

7.60E+2

6.940

6.187

6.987

6.366

5.838

5.995

6.023

8.00E+2

6.952

6.200

6.999

6.387

5.842

5.999

6.028

9.00E+2

6.977

6.227

6.450

5.849

6.011

6.040

1.00E+3

7.000

6.256

6.523

5.853

6.023

6.052

6.963

Values listed under each gas type are in volts (V).

ExampleThe gas in use is O2. Voltage output is 5.144 volts.
True pressure of O2 is 2.00E-01 Torr

NOTE

8.3.3 Convection gauge analog
output for selected gases

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If you are using the IG - ALT 0.5 - 7V analog output mode refer to the User Manualof your alternate gauge to determine the correction factors for various gases.

If you intend to use any of the analog outputs to represent measurements from
CG1 or CG2 for gases other than air/N2, you must also apply corrections to theanalog output. Use the following tables to determine pressure from voltage forgases other than nitrogen or air.

57

8.3.3.1 CG1 1 - 8 V or CG2 1 - 8 V
Analog Output Correction
Factors - Convection
Gauge

When using the Log-Linear convection gauge analog output mode (Log-Linear
1 - 8 V, 1 V/decade) for gases other than air/N2, use the following look-up table andinformation to convert the analog output to pressure. The look-up table has been
derived from the equation provided in section 7.7
Analog Output for Log-Linear CG1 1-8V or CG2 1-8V

True
Pressure(Torr)

N2

Ar

He

O2

CO2

KR

Freon12Freon22

D2

Ne

CH4

1.00E-4

1.000

1.000

1.000

1.000

1.000

1.000

1.000

1.000

1.000

1.000

1.000

2.00E-4

1.301

1.301

1.301

1.301

1.301

1.301

1.301

1.301

1.301

1.301

1.301

5.00E-4

1.699

1.699

1.699

1.699

1.699

1.477

1.699

1.699

1.699

1.699

1.699

1.00E-3

2.000

1.845

1.903

2.000

2.041

1.602

2.176

2.176

2.114

1.845

2.230

2.00E-3

2.301

2.146

2.204

2.301

2.362

2.000

2.491

2.491

2.380

2.176

2.519

5.00E-3

2.699

2.519

2.602

2.699

2.643

2.362

2.881

2.845

2.778

2.544

2.886

1.00E-2

3.000

2.820

2.908

2.987

3.041

2.681

3.167

3.130

3.083

2.851

3.185

2.00E-2

3.301

3.117

3.207

3.297

3.346

2.978

3.476

3.435

3.386

3.149

3.483

5.00E-2

3.699

3.511

3.607

3.692

3.740

3.371

3.860

3.839

3.778

3.542

3.888

1.00E-1

4.000

3.808

3.914

3.988

4.029

3.670

4.155

4.134

4.083

3.845

4.201

2.00E-1

4.301

4.100

4.217

4.288

4.322

3.960

4.439

4.418

4.398

4.149

4.498

5.00E-1

4.699

4.494

4.638

4.687

4.689

4.336

4.786

4.774

4.837

4.555

4.893

1.00E+0

5.000

4.778

4.973

4.987

4.978

4.602

5.021

5.017

5.190

4.872

5.204

2.00E+0

5.301

5.057

5.346

5.288

5.233

4.845

5.210

5.220

5.616

5.201

5.522

5.00E+0

5.699

5.389

6.130

5.697

5.524

5.107

5.389

5.418

7.391

5.719

5.877

1.00E+1

6.000

5.602

6.013

5.696

5.250

5.471

5.530

6.332

6.446

2.00E+1

6.301

5.763

6.348

5.819

5.360

5.521

5.571

7.766

7.550

5.00E+1

6.699

5.895

6.890

5.915

5.410

5.579

5.617

1.00E+2

7.000

5.946

7.320

5.966

5.438

5.670

5.691

2.00E+2

7.301

5.991

7.470

6.090

5.521

5.777

5.808

3.00E+2

7.477

6.053

7.580

6.228

5.555

5.838

5.876

4.00E+2

7.602

6.130

7.686

6.350

5.595

5.883

5.925

5.00E+2

7.699

6.207

7.781

6.458

5.624

5.918

5.964

6.00E+2

7.778

6.274

7.863

6.561

5.647

5.947

5.998

7.00E+2

7.845

6.338

7.934

6.664

5.667

5.974

6.029

7.60E+2

7.881

6.375

7.974

6.732

5.677

5.989

6.045

8.00E+2

7.903

6.400

7.999

6.774

5.685

5.998

6.057

9.00E+2

7.954

6.455

6.900

5.698

6.021

6.079

1.00E+3

8.000

6.512

7.045

5.706

6.045

6.104

7.925

Values listed under each gas type are in volts (V).

Example58

The gas in use is O2. Voltage output is 4.288 volts.
True pressure of O2 is 2.00E-01 Torr

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8.3.3.2 CG1 0 - 7 V or CG2 0 - 7 V
Analog Output Correction
Factors - Convection
Gauge

When using the Log-Linear convection gauge analog output mode (Log-Linear
0 - 7 V, 1 V/decade) for gases other than air/N2, use the following look-up table andinformation to convert the analog output to pressure. The look-up table has been
derived from the equation provided in section 7.8

True
Pressure(Torr)

N2

Ar

He

O2

CO2

KR

Freon12Freon22

D2

Ne

CH4

1.00E-4

0.000

0.000

0.000

0.000

0.000

0.000

0.000

0.000

0.000

0.000

0.000

2.00E-4

0.301

0.301

0.301

0.301

0.301

0.301

0.301

0.301

0.301

0.301

0.301

5.00E-4

0.699

0.699

0.699

0.699

0.699

0.477

0.699

0.699

0.699

0.699

0.699

1.00E-3

1.000

0.845

0.903

1.000

1.041

0.602

1.176

1.176

1.114

0.845

1.230

2.00E-3

1.301

1.146

1.204

1.301

1.362

1.000

1.491

1.491

1.380

1.176

1.519

5.00E-3

1.699

1.519

1.602

1.699

1.643

1.362

1.881

1.845

1.778

1.544

1.886

1.00E-2

2.000

1.820

1.908

1.987

2.041

1.681

2.167

2.130

2.083

1.851

2.185

2.00E-2

2.301

2.117

2.207

2.297

2.346

1.978

2.476

2.435

2.386

2.149

2.483

5.00E-2

2.699

2.511

2.607

2.692

2.740

2.371

2.860

2.839

2.778

2.542

2.888

1.00E-1

3.000

2.808

2.914

2.988

3.029

2.670

3.155

3.134

3.083

2.845

3.201

2.00E-1

3.301

3.100

3.217

3.288

3.322

2.960

3.439

3.418

3.398

3.149

3.498

5.00E-1

3.699

3.494

3.638

3.687

3.689

3.336

3.786

3.774

3.837

3.555

3.893

1.00E+0

4.000

3.778

3.973

3.987

3.978

3.602

4.021

4.017

4.190

3.872

4.204

2.00E+0

4.301

4.057

4.346

4.288

4.233

3.845

4.210

4.220

4.616

4.201

4.522

5.00E+0

4.699

4.389

6.130

4.697

4.524

4.107

4.389

4.418

6.391

4.719

4.877

1.00E+1

5.000

4.602

5.013

4.696

4.250

4.471

4.530

5.332

5.446

2.00E+1

5.301

4.763

5.348

4.819

4.360

4.521

4.571

6.766

6.550

5.00E+1

5.699

4.895

5.890

4.915

4.410

4.579

4.617

1.00E+2

6.000

4.946

6.320

4.966

4.438

4.670

4.691

2.00E+2

6.301

4.991

6.470

5.090

4.521

4.777

4.808

3.00E+2

6.477

5.053

6.580

5.228

4.555

4.838

4.876

4.00E+2

6.602

5.130

6.686

5.350

4.595

4.883

4.925

5.00E+2

6.699

5.207

6.781

5.458

4.624

4.918

4.964

6.00E+2

6.778

5.274

6.863

5.561

4.647

4.947

4.998

7.00E+2

6.845

5.338

6.934

5.664

4.667

4.974

5.029

7.60E+2

6.881

5.375

6.974

5.732

4.677

4.989

5.045

8.00E+2

6.903

5.400

6.999

5.774

4.685

4.998

5.057

9.00E+2

6.954

5.455

5.900

4.698

5.021

5.079

1.00E+3

7.000

5.512

6.045

4.706

5.045

5.104

6.925

Values listed under each gas type are in volts (V (dc)).

Exampletinb42e1-a(2019-10)

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The gas in use is O2. Voltage output is 3.288 volts.
True pressure of O2 is 2.00E-01 Torr59

8.3.3.3 CG1 NON-LIN or CG2
NON-LIN Analog Output
Correction Factors Convection Gauge
True
Pressure(Torr)

N2

Ar

When using the Non-Linear convection gauge analog output mode for gases otherthan air/N2, use the following look-up table and information to convert the analog
output to pressure. The look-up table has been derived from the equation provided
in section 7.9

He

O2

CO2

KR

Freon12Freon22

D2

Ne

CH4

0

0.3751

0.375

0.375

0.375

0.375

0.375

0.375

0.375

0.375

0.375

0.375

1.00E-4

0.37590.37570.3755

0.376

0.376

0.3755

0.376

0.376

0.376

0.37570.37662.00E-4

0.37680.376

0.3765

0.377

0.377

0.3768

0.378

0.378

0.377

0.37630.378

5.00E-4

0.3795

0.378

0.379

0.38

0.381

0.3772

0.382

0.381

0.381

0.37820.3825

1.00E-3

0.384

0.381

0.382

0.384

0.385

0.379

0.388

0.388

0.386

0.381

0.38962.00E-3

0.3927

0.387

0.389

0.392

0.395

0.384

0.401

0.4

0.396

0.388

0.403

5.00E-3

0.4174

0.403

0.409

0.417

0.412

0.395

0.437

0.432

0.425

0.405

0.438

1.00E-20.4555

0.429

0.441

0.453

0.462

0.415

0.488

0.48

0.47

0.433

0.492

2.00E-2

0.5226

0.477

0.497

0.521

0.536

0.451

0.581

0.566

0.549

0.484

0.584

5.00E-2

0.6819

0.595

0.637

0.679

0.705

0.544

0.778

0.764

0.727

0.608

0.796

1.00E-1

0.878

0.745

0.814

0.868

0.9

0.668

1.009

0.99

0.944

0.768

1.053

2.00E-1

1.1552

0.962

1.068

1.141

1.179

0.847

1.315

1.291

1.265

1.002

1.392

5.00E-1

1.6833

1.386

1.589

1.664

1.668

1.194

1.826

1.805

1.914

1.469

2.014

1.00E+02.2168

1.818

2.164

2.195

2.172

1.536

2.257

2.247

2.603

1.976

2.632

2.00E+02.8418

2.333

2.939

2.814

2.695

1.921

2.647

2.666

3.508

2.631

3.313

5.00E+03.6753

3.028

4.387

3.672

3.316

2.429

3.029

3.09

5.059

3.715

1.00E+1

4.2056

3.48

5.774

4.225

3.67

2.734

3.204

3.33

6.361

4.605

4.699

2.00E+1

4.5766

3.801

7.314

4.62

3.903

2.966

3.308

3.414

5.406

5.172

5.00E+1

4.8464

4.037

4.916

4.071

3.075

3.43

3.509

6.159

5.583

1.00E+2

4.9449

4.122

5.026

4.154

3.134

3.618

3.66

6.483

5.72

2.00E+2

5.019

4.192

5.106

4.336

3.269

3.827

3.883

6.661

5.86

3.00E+2

5.1111

4.283

5.2

4.502

3.384

3.938

4.005

6.726

4.00E+2

5.2236

4.386

5.315

4.621

3.466

4.016

4.088

6.767

5.00E+2

5.3294

4.477

5.422

4.708

3.526

4.076

4.151

6.803

6.00E+2

5.4194

4.55

5.515

4.775

3.573

4.124

4.203

6.843

7.00E+2

5.4949

4.611

5.592

4.83

3.613

4.166

4.247

6.89

7.60E+2

5.534

4.643

5.633

4.86

3.632

4.19

4.271

6.92

8.00E+2

5.5581

4.663

5.658

4.877

3.645

4.203

4.286

6.942

9.00E+2

5.6141

4.706

5.713

4.919

3.674

4.237

4.321

7

1.00E+3

5.6593

4.745

5.762

4.955

3.69

4.27

4.354

7.056

6.103
6.342

6.519
6.642

Values listed under each gas type are in volts (V (dc)).

60

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9 Communication Protocol (Serial Interface)
9.1 Device Specific Serial
Communication Info

The VGC083C provides RS232 and RS485 serial communications capability. The
following information and the command protocol summaries listed in the following
sub-sections of this chapter can be used to establish serial communications withthe device. Four distinct protocols (COMM type) are defined: INFICON RS232 andRS485 protocol and RS232 and RS485 protocols compatible with GP series 307
and 358 controllers. The user has access from the front panel main menu tochange settings for COM Type, Baud Rate, Data Bits, Parity, Stop Bits and device
Address (when using RS485).
Baud Rate is selectable at 300, 600, 1200, 2400, 4800, 9600, 19200 or
38400 baud.
Data bits may be set to either 7 or 8.
Parity selection may be set to None, Even or Odd.
Either 1 or 2 Stop Bits may be selected.
The device address when using RS485 can be within the range 00 to FF hexadecimal (Default = 01).
There is a finite period of time between the time a command is sent from a terminal(PC COM Port, for example) and the point in time in which the VGC083C starts tosend a response to that command. This delay is dependent upon the command
sent and the baud rate.

The maximum command repetition rate will depend on the length of the command
sent and the response received, as well as the baud rate. The maximum repetition
rate for the baud rate you are using can be found in the following table:

9.2 INFICON RS232 / RS485
Command Protocol
Summarytinb42e1-a(2019-10)

VGC083C.om

Selected Baud
Rate

Repetition Rate

Receive to Transmit
Time

38400
19200
9600
4800
2400
1200
600
300

38 ms
46 ms
61 ms
93 ms
156 ms
280 ms
530 ms1030 ms

26 μs
52 μs
1.0 ms2.0 ms
4.1 ms
8.3 ms
16 ms
33 ms

The following notes are intended to be understood by the user when using
INFICON's RS232 and RS485 command protocol with the VGC083C.
1. Default settings are 19,200 baud rate, 8 data bits, No Parity, 1 stop bit.
2. The baud rate can be set to different values using the front panel soft-keys.
3. All Responses are 13 characters long when COMM TYPE menu selected is
RS485 or RS232.
4. 'xx' is the address of the device (00 thru FF). For RS232, 'xx' is replaced with
two space characters.

61

5. <CR> is a carriage return, a non-printable character. Do not enter <CR> fromyour keyboard. A carriage return, non-printable character may be entered as
the Unicode C0 controls specified value: 0D hexadecimal (13 decimal). From
your keyboard, a key entry sequence of CNTL-M may be used to obtain therequired character for a carriage return when using certain terminal emulator
programs.
6. '_' represents a 'space' character. Press the space bar on your keyboard. Do
not enter a '_' (underscore) character.
7. All commands sent to the controller start with a '#' character, and all normal
responses from the controller start with a '*' character. Error responses startwith a "?".
8. A valid address must be used [Factory default = 01] when using the RS485
protocol. The VGC083C will not respond to a command with an invalid address
while using RS485.
9. The command syntax examples used in the protocol summary table for ASCII
are shown in scientific notation. However, floating point notation is acceptableas long as a leading digit is entered as '0.' or '1.', etc. There must be a digit to
the left of the decimal point. For example, when constructing the syntax for thecommand to set the CGn zero value (e.g., #xxTZn_x.xxE-pp<CR> when using
scientific notation), use either #xxTZn_0.00<CR>, or #xxTZn_0<CR>. A simple'0' is valid for the pressure entry.

9.3 INFICON RS232 andRS485 Command
Protocol Summary

The RS232 mode is the same as RS485, except ADDRESS is ignored in RS232
mode and must be eliminated from the command string or replaced with spacecharacters. Responses will not return ADDRESS; the ADDRESS is replaced withspace characters. Response is 13 characters including carriage return. All pressure
measurement responses are in absolute pressure units as selected by the user.
Please see qualifying notes at bottom of table.

Table "INFICON RS232 and RS485 Command Protocol Summary"
COMMAND

BRIEF DESCRIPTIONCOMMAND SYNTAXREAD ION GAUGEPRESSURE

Read the current displayed #xxRDIG<CR>
pressure of the ion gauge inthe same units of measure e.g.: #01RDIG<CR>
on display
where, xx = the two digit
address of the device (node)

RESPONSE - EXAMPLES*xx_y.yyEzpp<CR>
where,
y.yy = mantissa,z = sign of the exponent +/and pp = the exponent
e.g.: *01_1.53E-06<CR>
When IG is off: *01_1.10E+03

READ CGn
PRESSURE

Read the current pressure#xxRDCGn<CR>
for CGn in the same units of e.g.: #01RDCG1<CR>measure on display
where, n=1 or 2 (CG1 or CG2)

*xx_ y.yyEzpp <CR>
e.g.: *01_7.60E+02<CR>
When CG is over ranged:*01_1.10E+03

READ AI Pressure

Read the current pressure
for AI in the same units ofmeasure on display*xx_ y.yyEzpp <CR>
e.g.: *01_7.60E+02<CR>
When AI is over ranged or not
powered: *01_1.10E+03#xxRDAI<CR>
e.g.: #01RDAI<CR>(continued)

62

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Table "INFICON RS232 and RS485 Command Protocol Summary" (continued)
COMMAND

BRIEF DESCRIPTIONREAD all Process
Control (PC, or
Relay) states

Read the current state of all #xxRL<CR>
process control setpoint
e.g.: #01RL<CR>
relaysCOMMAND SYNTAXRESPONSE - EXAMPLES*xx_003F_RL_<CR>
In the example response above,the 'F' represents the first 4 relays; relays 5 and 6 are the second digit (the '3') of the response.
This example shows that all
relays are ON, i.e., energized.
The '3F' would represent thebinary string of0011 1111, where 0011 is the 3
and 1111 is the F in '3F'
A response of 0003 means that
only RL1 and RL2 are ON, i.e.,energized

READ one PC state

Read the current state of#xxRLn<CR>
one process control setpoint where n = 1,2,3,4,5 or 6
e.g.: #01RL1<CR>*xx_0_RL_OFF<CR>*xx_1_RL_ON_<CR>

READ IG on/off
STATUS

Find out if Ion Gauge isturned to ON and gauge isreading pressure#xxIGS<CR>
e.g.: #01IGS<CR>*xx_0_IG_OFF<CR>*xx_1_IG_ON_<CR>

TURN IG ON

Turn the Ion Gauge ON#xxIG1<CR>
e.g.: #01IG1<CR>#xxIGy<CR>
where,
Y=1= Turn ON;
y=0= Turn OFF*xx_PROGM_OK<CR>
When IG error exists:?01_INVALID_<CR>

TURN IG OFF

Turn the Ion Gauge OFF#xxIG0<CR>
e.g.: #01IG0<CR>#xxIGy<CR>
where,
Y=1= Turn ON;
y=0= Turn OFF*xx_PROGM_OK<CR>
Even though the IG will alreadybe OFF, when an IG Error
occurs, sending the IG OFF
command will clear errors

SET CGn ZERO

Set the zero or vacuum
calibration point for CGn#xxTZCGn <CR>
*xx_PROGM_OK<CR>
e.g.: #01TZCG1_0<CR>
When P > 100 mTorr:?01_INVALID_<CR>
e.g.: #01TZCG2_1.23E-02
When CG is not connected:<CR>?01_INVALID_<CR>
where,
When requested gauge number
n=1 or 2 (for, CG1 or CG2)
<1 or >2:
y.yy = mantissa,?01_SYNTX_ER <CR>z = sign of the exponent +/- andpp = the exponent(continued)

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63

Table "INFICON RS232 and RS485 Command Protocol Summary" (concluded)
COMMAND

BRIEF DESCRIPTIONSET CGn SPAN

Set the span or atmosphere #xxTSCGn_y.yyEzpp<CR>*xx_PROGM_OK<CR>
calibration point for CGne.g.: #01TSCG1_
When P < 400 Torr:?01_INVALID_<CR>
7.60E+02<CR>
When requested P < 400Torr:
where,?01_INVALID_<CR>
n=1 or 2 (for, CG1 or CG2)
When requested P > 1000mT:
y.yy = mantissa,?01_INVALID_<CR>z = sign of the exponent +/- and When CG is not connected:
pp = the exponent?01_INVALID_<CR>

COMMAND SYNTAXRESPONSE - EXAMPLES

When requested gauge number<1 or >2:
?01_SYNTX_ER <CR>
(continued)

NOTES:
1. <CR> is a carriage return (0x0D). This is the terminator character.
2. The '_' used in certain defined commands represent a space character. Space
characters may be omitted from commands.
3. Hardware handshake controls do not exist on VGC083C (e.g., RTS, CTS,
DTR).

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9.4 RS232 GP 307 and 358
ProtocolRS232 protocol compatible with the GP Series 307 and 358 VGC is as defined in
the following table. Please see qualifying notes at bottom of table.
Table "RS232 GP 307 and 358 Protocol"

COMMAND

BRIEF DESCRIPTIONCOMMAND SYNTAXREAD IGnor, READ IG

Read the current IG
DS_ IGn<CR> <LF>
pressure in units of Torr only, e.g.: DS_ IG1<CR><LF>
1 = fil1, 2 = fil2
If you have selected filament or
1 to operate with the IG ON
DS_ IG<CR> <LF>
(see 'IG ON' below), thenenter IG1 in the READ IGn e.g.: DS_ IG1<CR><LF>
command; use IG2 iffilament 2 is turned ON

y.yyEzpp<CR><LF>
e.g.: 1.53E-06<CR><LF>
where, y.yy = mantissa,z = sign of the exponent +/and pp = the exponent
When IG is off: 9.90E+09

READ CGn

Read the current CG pressure in units of Torr only

y.yyEzpp<CR><LF>
e.g.: 1.53E+02<CR><LF> When
CG is not connected:
9.90E+09
When CG is over ranged:
9.90E+09

READ PCs in longform

Read the current Process
PCS<CR> <LF>
Control setpoint relay status e.g.: PCS<CR><LF>

DS_ CGn<CR> <LF>
e.g.: DS_ CG1<CR><LF>
where, n = 1 for device CG1
and n = 2 for CG2

READ PCs in binary Read the current Process
PCS_B<CR> <LF>
form
Control setpoint relay status e.g.: PCS_B<CR><LF>{continued on next page}{continued from previous
page}

READ individual PC

Read the current
individual Process Control
setpoint relay status

IG ON

Turn specified IG filament
IGn_ON<CR> <LF>
ON
e.g.: IG1_ON<CR><LF>
Note that the functions of IG where,
ON/OFF and Filament Sen = 1 = fil1, 2 = fil2
lection are combined in the
single IG ON/OFF command.
When turning the IG to ON,
the specific filament chosen
is selected when sending the
IG ON/OFF commands.

PCS_n<CR> <LF>
e.g.: PCS_1<CR><LF>RESPONSE - EXAMPLES

x,x,x,x,x,x<CR><LF>
e.g.: 1,1,0,0,0,0<CR><LF>
Relays 1 and 2 are energized;order is Relay No.1,2,3,4,5,6
from left to right.
x<CR><LF>
e.g.: C<CR><LF>
The Latin alphabet character"C" corresponds to binary
01000011 or, 43hex, which represents relay 1 and relay 2 areenergized (ON). Note that thepositions of the relay order in the
returned code character are
reversed from the long form as
described for the READ PCs inlong form command above.
In binary form, the order is Relay
No.6, 5, 4, 3, 2, and 1 as readfrom left to right.
s<CR><LF>
where, s=state of relay:
1 = ON; 0 = OFFe.g.: 1<CR><LF> (PC Relay 1
is energized, or 0 when not)
OK<CR><LF>
e.g.: OK<CR><LF>
When IG is already ON: INVALID(continued)

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Table "RS232 GP 307 and 358 Protocol" (concluded)
COMMAND

BRIEF DESCRIPTIONCOMMAND SYNTAXRESPONSE - EXAMPLESIG OFF

Turn specified IG filamentOFF

IGn_OFF<CR> <LF>
e.g.: IG1 OFF<CR><LF>
where,
n = 1 = fil1, 2 = fil2

OK<CR><LF>
e.g.: OK<CR><LF>
When IG is already OFF:INVALIDNOTES:
1. <CR> is a carriage return (0x0D).
2. <LF> is a line feed (0x0A); this is the terminator character.
3. The '_' used in certain defined commands represent a space character. Space
characters may be omitted from commands.
4. GP 307 and 358 protocol response strings are variable length.
5. Hardware handshake controls do not exist on VGC083C (e.g., RTS, CTS,
DTR).

9.5 RS485 GP 307 and 358
Protocol

RS485 protocol compatible with the GP Series 307 and 358 VGC is as defined in
the following table. Please see the qualifying notes listed at bottom of table.
Table "RS485 GP 307 and 358 Protocol"

COMMAND

BRIEF DESCRIPTIONCOMMAND SYNTAXREAD IGnor, READ IG

Read the current IG#xxDS_IGn<CR>pressure in units of Torr only e.g.: #01DS IG1<CR>
where, n = 1 = fil1, 2 = fil2
or
DS_ IG<CR> <LF>
e.g.: DS_ IG1<CR><LF>

READ CGn

Read the current CG#xxDS_CGn<CR>pressure in units of Torr only e.g.: #01DS CG1<CR>
where,
n = 1 or 2 (CG1 or CG2)RESPONSE - EXAMPLES
y.yyEzpp<CR>
e.g.: 1.53E-06<CR>
where, y.yy = mantissa,z = sign of the exponent +/and pp = the exponent
When IG is off: 9.90E+09
y.yyEzpp<CR>
where, y.yy = mantissa,z = sign of the exponent +/and pp = the exponent
e.g.: 1.53E+02<CR>
When CG is not connected:
9.90E+09
When CG is over ranged:
9.90E+09

READ PCs long form Read the current PC setpoint #xxPCS<CR>
statuse.g.: #01PCS<CR>

x,x,x,x,x,x<CR>
e.g.: 1,1,0,0,0,0<CR> (Relays
1 and 2 are energized; Relays 3 6 are not energized)

READ PCs binary
form

Read the current PC setpoint #xxPCS_B<CR>
statuse.g.: #01PCS B<CR>

x<CR>
e.g.: C<CR> (where ‘C’ is theUnicode character C, expressedas 01000011 in binary notationor 43 hexadecimal)

READ individual PC

Read the current individual
PC setpoint status

x<CR>
e.g.: 1<CR> (where ‘1’ indicates
PC 1 is energized; 0 when not)#xxPCS_x<CR>
e.g.: #01PCS_1<CR><LF>(continued)

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Table "RS485 GP 307 and 358 Protocol" (concluded)
COMMAND

BRIEF DESCRIPTIONCOMMAND SYNTAXRESPONSE - EXAMPLES

IG ONTurn specified IG filament
ON#xxIGn_ON<CR>
e.g.: #01IG1 ON<CR>
where,
n = 1 = fil1, 2 = fil2

OK<CR>
e.g.: OK<CR>
When IG already ON: INVALID

IG OFF

Turn specified IG filamentOFF#xxIGn_OFF<CR>
e.g.: #01IG1 OFF<CR>
n = 1 = fil1, 2 = fil2

OK<CR>
e.g.: OK<CR>
When IG already OFF: INVALIDNOTES:
1. <CR> is a carriage return (0x0D). This is the terminator character.
2. The '_' used in certain defined commands represent a space character. Space
characters may be omitted from commands.
3. GP 307 and 358 protocol response strings are variable length.

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10 Service

10.1 Calibration

Every INFICON module is calibrated prior to shipment using nitrogen. Care should
be exercised when using gases other than nitrogen (N2) / air (see previous sections
regarding the use of gases other than N2/air).

10.2 Maintenance

Periodic performance checks may be done by comparing the vacuum gauges to a
known reference standard. When using the transducer in gases containing contaminants periodic cleaning of the cold cathode sensor is recommended. Refer to the
Operating Manual of MAG050 / MAG060 for such cleaning instructions.

10.3 Troubleshooting Operation
Indication

Possible Cause

Display on VGC083C controller indicates No powerOFF
Displayed pressure appears very
different from expected pressure

Possible Solution
Check cable connections and verify thatpower is being supplied

Sensor not in the proper location to
Ensure the sensor is located inmeasure system pressure
appropriate location
The process gas is different from the gas Apply gas correction factor if applicable(Nitrogen) used to calibrate theMAG050 / MAG060
Sensor has been dropped causing
Replace the cold cathode sensor
mechanical damage
Gauge is contaminatedClean or replace sensor
Leak in the vacuum system
Re-check for leak in the system. Check
that all metal seals are used when
-7
operating below 1.00 × 10 Torr
Incorrect Sensitivity or CAL FACTORS Ensure correct values programmed

Displayed pressure is significantly lower The gauge sensor is contaminatedClean or replace sensor
than expected pressure
Incorrect Sensitivity and CAL FACTORS Ensure correct values programmed
Gauge cannot be activated (unable toturn anode voltage on)

Pressure exceeds value programmed for Decrease pressure below required value
OVER PRESSURE in the SETUP IG
menu
Chamber pressure higher than
Decrease chamber pressure below-35.00×10 Torrvalue programmed for OVER
PRESSURE in the ION GAUGE menu

Gauge will not start at low pressure

Pressure is too low to initiate discharge

Research Screen shows anode Voltage Defective electronics
is present but total current stays at zero

68

Repeat step to activate sensor
Increase HV TIMEOUT to allow moretime for sensor activation
Increase pressure
Repair or replace electronics

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10.4 Troubleshooting Error Messages
Indication

Possible Cause

Possible Solution

OVERPRESSURE

Pressure exceeds value programmed for
OVER PRESSURE in the SETUP IG
menu
Chamber pressure higher than the OVER
PRESSURE value

Decrease chamber pressure below
required value

HV FAILURE

Chamber pressure higher than the OVER
PRESSURE value
Defective Electronics

Decrease pressure below the OVER
PRESSURE value
Repair or replace electronics

CURRENT FAIL

Sensor contamination
Defective Electronics

Clean or replace sensor
Repair or replace electronics

DISCHARGE FAIL

Electrical discharge has not been
established to activate sensor
Defective Electronics

Repeat step to activate sensor
Increase HV TIMEOUT to allow moretime for sensor activation
Repair or replace electronics

Internal PCB not communicating

Contact INFICONCOMM IO FAIL

Decrease chamber pressure below value
programmed for OVER PRESSURE in
the SETUP IG menu

10.5 Clearing Error
Messages

Once the cause of the IG error has been determined and resolved, the IG error
must be cleared before the IG anode can be turned on again. To clear errors,
simply press the IG ON/OFF key.

10.6 Research Screen

The OLED setup screen of the VGC083C can be configured to display important,critical operating parameters of the MAG050 / MAG060.These parameters can bedisplayed in the Research display mode as described below.

10.6.1 Research Screen(Diagnostic Display)

When you have a MAG050 / MAG060 connected to the VGC083C, the Researchdisplay screen will show electrometer current (discharge current) and the cold
cathode IG anode voltage similar to the following:

The indication of 'IC' in the top line of this display is a real time measurement of thecold cathode discharge current. This current is proportional to the density of gas
inside the transducer (sensor). The VGC083C front panel indication of pressure isbased on this discharge current level. As the gas density increases the discharge
current also increases. The pressure reading for the cold cathode ionization gauge
is determined by the output of an electrometer circuit in the MAG050 / MAG060, a
nominal curve-fit algorithm and a look-up table that resides in the VGC083C
controller operating system.
The indication of 'HV' in the bottom line of this display is a real time measurementof the cold cathode anode voltage. This voltage will change with increasingpressure. If the pressure reading that you see in the VGC083C LED IG display line
is lower than expected, these two indications in the RESEARCH Screen may beviewed to, perhaps, discern the relative conditions of the measurement being
made. If the cold cathode IG has become contaminated, excess electrical current
leakage may occur causing the anode voltage to be lower than it should be for thepressure measurement to be realistic. The best practice is to document the discharge current and anode voltage at initial installation of the device then, thereafterat periodic intervals over time at a known operating pressure for your system. In
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general, your system base pressure may be relatively stable (assuming no leaks
have developed and that the vacuum pump is operating at normal pumping
capacity). The base or ultimate pressure of your vacuum system may be a goodpressure level to periodically check and record the readings displayed in the
RESEARCH Screen.

10.7 Cleaning the VGC083C

For cleaning the outside of the unit a slightly moist cloth will usually do. Do not use
any aggressive or scouring cleaning agents.

11 Repair
Return defective products to your nearest INFICON service center for repair.
INFICON assumes no liability and the warranty is rendered null and void if repair
work is carried out by the end-user or by third parties.

12 Accessories
Power supply

Ordering number
1)Power supply to VGC083C (no power cord included )1)

The conventional IEC60320 AC receptacle allows use with any
user supplied AC mains power cord set available worldwide.

Ordering number

Rack mount adapter

Cables 250 °C
MAG050, MAG060

Cables 80 °C
MAG050, MAG060

Cables 50 °C
PEG05070399-711

Rack mount adapter for 19" 2U for one VGC083C

399-714

Rack mount adapter for 19" 2U for two VGC083C

399-715

Ordering number
Cable 3 m / 10 ft, 250 °C, MAG050, MAG060

399-830

Cable 8 m / 25 ft, 250 °C, MAG050, MAG060

399-831

Cable 15 m / 50 ft, 250 °C, MAG050, MAG060

399-832

Ordering number
Cable 3 m / 10 ft, 80 °C, MAG050, MAG060

399-820

Cable 8 m / 25 ft, 80 °C, MAG050, MAG060

399-821

Cable 15 m / 50 ft, 80 °C, MAG050, MAG060

399-822

Ordering number
Cable 3 m / 10 ft, 50 °C, PEG050

399-580

Cable 8 m / 25 ft, 50 °C, PEG050

399-581

Cable 15 m / 50 ft, 50 °C, PEG050

399-582

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13 Storage
CautionElectronic components.
Inappropriate storage (static electricity, humidity etc.) may damage
electronic components.
Store the product in an antistatic bag or container. Observe the relevant specifications under Technical Data (→  8).

14 Disposal
WARNING
Detrimental to the environment.
Products or parts thereof (mechanical and electric components,
operating fluids etc.) may be detrimental to the environment.
Please dispose of such materials in accordance with the relevant local
regulations.

Separating the components
Electronic and non-electronic
components

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After disassembling the product, separate its components in accordance with thefollowing criteria:
Such components must be separated according to their materials and recycled.

71

EU Declaration of Conformity
We, INFICON, hereby declare that the equipment mentioned below complies withthe provisions of the following directives:

Product•

2014/30/EU, OJ L 96/79, 29.3.2014•

2011/65/EU, OJ L 174/88, 1.7.2011(EMC Directive; Directive relating to electromagnetic compatibility)(RoHS Directive; Directive on the restriction of the use of certain hazardous substances in electricaland electronic equipment)

Vacuum Gauge Controller
VGC083C

Part numbers

399-702

Standards

Harmonized and international/national standards and specifications:• EN 61000-6-2:2005(EMC: generic immunity standard for industrial environments)• EN 61000-6-4:2007 + A1:2011(EMC: generic emission standard for industrial environments)• EN 61010-1:2010(Safety requirements for electrical equipment for measurement, control and laboratory use)

• EN 61326-1:2013; Group 1, Class A(EMC requirements for electrical equipment for measurement, control and laboratory use)

Manufacturer / Signatures

72

INFICON AG, Alte Landstraße 6, LI-9496 Balzers
9 July 2018

9 July 2018

Dr. Benhard Andreaus
Director Product Evolution

Markus Truniger
Product Manager

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Notestinb42e1-a(2019-10)

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Original: English

LI–9496 Balzers
LiechtensteinTel +423 / 388 3111
Fax +423 / 388 3700
reachus@inficon.com
www.inficon.com