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X üWõZpÁW ¡ X ü°÷¾Ì»óÆ¡ãÌúÒTable 1NãEarly History of X­ray Microscopy¢EÌàÝ1895NX üÌ­©

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X­ray induced signals from material.

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Fig. 10Zernike­type phase­contrast X­ray microscope.

X­ray absorption and Zernike­type phase contrast images oflatex spheres.
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X­ray uorescence image of iron silicide (b­FeSi2).

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Fig. 13Fig. 14Full­eld X­ray uorescence imaging microscope.

3D element mappings of metal elements included in alfalfa seed. (a) Iron and zinc X­ray uorescence images.
(b) Cross sectional images of gures in (a). (c) 3D image of zinc distribution.

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Present status and future prospect of X­ray
microscopes\Is it possible to realize X­ray 1 nmimaging?
Sadao AOKI

Graduate School of Pure and Applied Sciences, University of Tsukuba
1_1_1, Tennoudai, Tsukuba, Ibaraki 305_8573

Abstract High resolution X­ray imaging has been developed by using various optical elements and opticalsystems. In the soft X­ray region (`3 nm) about 20 nm spatial resolution has been obtained, while in the hardX­ray (`0.1 nm) about 50 nm. In the research frontier the spatial resolution better than 10 nm has beenreported. The possibility to approach 1 nm spatial resolution is presented.

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