Mi c ro N a n o 2 0 0 9

Co n c u r re n t Pro g r a m s

15 th International Micromachine Nanotech Symposium ~MEMS World~ Program“MEMS/NEMS evolved by integration and convergence” ~ Breakthrough for industrialization, Concentration of R&D activities into several major international institutes and Promising applications ~Sponsor: Micromachine Center / MEMS Industry Forum

Special Venue A
7/29(Wednesday)

Chair: Ryutaro Maeda, Prime Senior Researcher, National Institute of Advanced Industrial Science and Technology

Opening
10:30-10:35 Opening Remarks
10:35-10:40 Guest Speech
Keynote sessionConcentration of R&D into Major International Institutes
10:40-11:10 MEMS in France: the R&D model and vision at LETI / MINATEC
11:10-11:40 Towards micro and nano technologies for integrated systems

Tamotsu Nomakuchi, Micromachine Center
Takeshi Yonemura, Manufacturing Industries Bureau, METI

Andre Rouzaud, Silicon Heterogenous Integration Dept. CEA-LETI. MINATEC
Thomas Gessner, Prof. Head of Fraunhofer ENAS (Research Institution for Electronic Nano Systems)
11:40-12:10 Worldwide Growth Opportunities for MEMS: MIG’s Perspective on MEMS Activities in the US and Emerging Technologies
Karen Lightman, Managing Director, MEMS Industry Group
Session 1
New World Explored by MEMS
13:10-13:40 Animal Watch Sensor System for Human Health and Food Safety
Toshihiro Ito, Group Leader, Networked MEMS Technology Group, Advanced Manufacturing Research Institute, National Institute of Advanced Industrial Science and Technology
13:40-14:10 Silicon Light Modulators: An Enabling Technology
14:10-14:40 Wearable Sensor Technologies for Realizing Safe, Secure and Healthy Societies
14:40-15:10 Harsh Environment Wireless MEMS Sensors for Energy & Power
Session 2
Latest Fabrication Process and Material Corresponding to Development Frontline
15:20-15:45 Can SOI break the MEMS law ? A material supplier’s view
15:45-16:10 Chip to Wafer bonding: The latest technology and future prospective

Thilo Sandner, Fraunhofer Institute for Photonic Microsystems
Kiyoshi Itao, Prof., Tokyo University of Science
Albert P. Pisano, Prof. and Chair, Department of Mechanical Engineering, UC Berkeley, BSAC
Markku Tilli, Senior Vice President, Research, Okmetic Oyj
Sunil Wickramanayaka, Director of Technology, Technology Div., EVGroup
Marco Moraja, Business Manager, Getter for MEMS, SAES Getters S.p.A.

16:10-16:35 Hermetic packaging designs of MEMS : past and future prospective
Closing
16:35-16:45 Closing Remarks

Keiichi Aoyagi, Micromachine Center

MEMS Mounting & Packaging ForumSponsor: Micromachine Center / MEMS Industry Forum Japan Welding Society / Microbonding Study GroupSpecial Venue B

13:00-13:10
13:10-13:50
13:50-14:30
14:30-14:50
14:50-15:10

Opening Remarks

Keiichi Aoyagi, Micromachine Center

Progress in MEMS Integration and Hopes for the Creation of New Industries
Advances in Electronic Device Mounting and New Trends

Susumu Sugiyama, Ritsumeikan University
Kozo Fujimoto, Osaka University

Creation of Functionally Integrated MEMS Through Wafer-level Packaging

Masao Kubo, Panasonic Electric Works Co., Ltd.

Development of Heterogeneous Material Multilayer MEMS Integration Technologies
15:10-15:30 Development of Low-cost RF-MEMS Variable Capacitors using In-Line WLP (Wafer Level Package) Technology
15:30-15:50 Patterning Technology for Three-dimensional Substrates using Non-linear Lithography

Ryo Ota, Olympus Corporation
Susumu Obata, Toshiba Corporation
Hiroaki Nishiyama, Osaka University

Special Venue A

Japan-Germany MicroNano Business ForumSponsor: IVAM Microtechnology Network

Cosponsor: Micromachine Center / MEMS Industry Forum

Time: 10:30 a.m. - 2:15 p.m.
Program: This forum is sponsored by the IVAM Microtechnology Network based in the North Rhine-Westphalia (NRW) province of Germany. It introduces the technologies and products of IVAM membercompanies (located mainly in Europe) and also provides opportunities for business tie-ups between IVAM member companies and Japanese companies.

BEANS Project Seminar
Sponsor :New Energy and Industrial Technology Development Organization (NEDO) / BEANS Laboratory
13:10-13:15 Opening Remarks from Sponsor
13:15-13:25 Opening Remarks from Project Leader

7/30
Special Venue B(Thursday)

13:25-13:55
13:55-14:25
14:35-14:55
14:55-15:15
15:15-15:35
15:35-15:55
15:55-16:15
16:15-16:35
16:35-16:55
16:55-17:00

Special Venue A

7/31Atsushi Yusa, BEANS Laboratory
Masayoshi Esashi, Tohoku University
Tsuneyuki Miyake, Nikkei Microdevices

Prospects for MEMS and Expectations for BEANS Project
The MEMS Market and Recent Technical Trends
The Structure and Significance of the BEANS Project
Use of Hydrogel Beads for Enclosure, Embedding and Assembly

Hiroyuki Fujita, Tokyo University
Shoji Takeuchi, Tokyo University

Manufacture of Organic Nanostructures to Achieve Dramatic Improvement in Organic Semiconductor PerformanceSupercritical Film Formation Technologies for Filling In Nanogaps
Ultra-low Damage Neutral Particle Beam Etching Technologies
Application of MicroNano Processing Technologies to Infrared Sensors for Use in Outer Space
Macro-BEANS Strategies for Achieving Meter-class Large-area Advanced Devices

Chihaya Adachi, Kyushu University
Masakazu Sugiyama, Tokyo University

Seiji Samukawa, Tohoku University
Masaaki Kimata, Ritsumeikan University
Toshihiro Ito, National Institute of Advanced Industrial Science and Technology (AIST)

Closing Remarks

Keiichi Aoyagi, Micromachine Center

MicroNano 2009 MEMS Industry Forum(Friday)

Moderator: Yutaka Takei, BEANS Laboratory
Akira Uehara, New Energy and Industrial Technology Development Organization (NEDO)-Achieving Growth and Broadening the Base of the MEMS Industry: New Ideas from the MEMS Industry Forum-

Sponsor: Micromachine Center / MEMS Industry Forum
Moderator: Masahiro Katashiro Micromachine Center / MEMS Industry Forum
Opening
10:30-10:35 Opening Remarks
Koichi Imanaka Omron Corporation (Vice Chairman, MEMS Industry Forum)
10:35-10:50 Introductory Talk: What is Needed for MEMS Industry Development? - The Role and Activities of the MEMS Industry Forum Keiichi Aoyagi Micromachine CenterSession 1
Data Evidence for MEMS Industry Growth
10:50-11:10 Current Trends in MEMS Technology and Future Prospects as Seen in International Conferences
Shuichi Shoji Waseda University
11:10-11:30 The Main Players in the MEMS Industry (Survey of Industry Trends in the MEMS Field)
Shun'ichi Adegawa Micromachine Center
11:30-11:50 Latest Trends in MEMS International Standardization - Growth in Demand and Business Activity Kuniki Ohwada Teikyo University
11:50-12:10 How to Use International Standards to Evaluate MEMS Materials
Kazuki Takashima Kumamoto University
Session 2
Prevailing in International Competition Through Research and Development & Improvement of Manufacturing Infrastructure
13:05-13:25 Creating a MEMS "Integrated Center of Knowledge and Experience" in the Nanotech Arena
Masahiro Katashiro Micromachine Center / MEMS Industry Forum
13:25-13:45 Improving the MEMS Foundry Network System- Incorporation into Standard Processes Fumihiko Sato, Omron Corporation
13:45-14:05 MemsONE: A Verification Tool for Issues in the MEMS Design and Manufacturing ProcessYoshiharu Suizu Micromachine Center
14:05-14:25 MEMSPedia: An Encyclopedia for the MEMS Field
Tomoyuki Koike Micromachine Center
14:25-14:45 Personnel Training in New Project Development & Innovation in the Area of MicroNano Mass Production Technologies and Applied Device Manufacturing
Masaharu Takahashi National Institute of Advanced Industrial Science and Technology (AIST)
14:45-15:15 Research & Development for Establishing a MEMS Industry in Korea
Korea Institute of Industrial Technology (KITECH), Senior Researcher, Sung Ho Lee, Ph.DSession 3Expectations for the Establishment of R & D Centers for the MEMS Industry
15:15-15:35 MEMS Industry Efforts in Tohoku
Yutaka Takei General Coordinator, Tohoku Industrial Cluster & MEMS PARK CONSORTIUM
15:35-15:55 Microfabrication Technology Efforts in Kyushu
Nagao Miyashita Industry-Academia Cooperation Center, Kita-Kyushu Foundation for the Advancement of Industry, Science and Technology
15:55-16:15 Establishing MicroNano Technology Centers Through Transcription - Deployment in the Sustainable Energy Field Tadashi Hattori Hyogo Prefectural University
Closing
16:15-16:20 Closing Remarks
Keiichi Aoyagi Micromachine Center

Special Venue B

Fine MEMS Project Achievements SeminarSponsor: New Energy and Industrial Technology Development Organization (NEDO)This seminar will present the total research and development achievements of the Highly Integrated and Complex MEMS Manufacturing Technology Development Project (Fine MEMS Project) (FY 20062008) that ended in FY 2008, in the Project's four development categories (MEMS/nano-function composite technology, MEMS/semiconductor integrated fabrication technology, MEMS/MEMS highintegration composite technology, and establishment of a database of high integration composite MEMS knowledge) as well as in terms of the development of a fine MEMS system design platform.
Note: The details of the program have not yet been finalized.

MICRONANO No. 68
MICRONANO is published quarterly by Micromachine Center (MMC), BEANS Technical Research Association(BEANS . TRA) to promote the international exchange of information related to micromachines, R&D and othertechnical topics, and is circulated free of change. Please send your comments about MICRONANO to the publisher :Keiichi Aoyagi, Executive Director, Micromachine Center (MMC)
MBR99 Bldg., 6F., 67 Kanda Sakumagashi, Chiyoda-ku, Tokyo 101-0026, Japan
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Internet Home Page h t t p : / / w w w . m m c . o r . j p /Date of Issue : August 21, 2009