For High Purity Chemicals

Semicon Cupla
SCAL Type

Valve structure

Polytetrafluoroethylene (PTFE)

Size (Thread)

1/4", 3/8", 1/2", 3/4", 1"
1/4-18NPT, 3/8-18NPT, 1/2-14NPT, 3/4-14NPT, 1-11.5NPT

Pressure unitMPa

kgf/cm2

bar

Working pressure

0.2

22

29

Seal material

Mark

Workingtemperature range

Remarks

SocketO-ringSeal material

For semiconductor manufacturing equipment
Working pressure

Specifications
Body material

Working temperature
range

P

Perfluoroelastomer+5˚C to +50˚C Standard material

Fluoropolymer resin (PFA)

Valve

Applicable fluidsPSIMax. Tightening amount (approximate)

0.2
Two-way shut-off(Non-Spill)

High purity
chemicals

WaterGasAir

3

1 4 to 2 turns

Body is polytetrafluoroethylene (PTFE).
• Polytetrafluoroethylene (PTFE) body gives excellent resistance to chemicals.
• Unique seal design ensures minimal liquid spill.
• Both socket and plug have built-in automatic shut-off valves that prevent fluid
from outflowing when disconnected.
• No dissolution of metal ions from part in contact with liquid ensures excellentreliability.
• Push-to-connect design.
• Flanged socket body makes it easy to push down sleeve even when wearing gloves.
• All components are cleaned, assembled, inspected and then packed in aclean room.
• Concaved surface of the plug end prevents liquid loss and protects the plug seal
surface from damage if dropped or hit.
• To prevent incorrect connection, a keyed type sleeve is available on a made-to-orderbasis.
• Ten key angle positions are available.
The appearance of the keyed typebody slightly differs fromthat of the standard type.

Made-to-order item

1/4" • 3/8" • 1/2" • 3/4" • 1" Size

Whichever method, overtightening may damage the thread and cause leakage, so take extra care.

Interchangeability
The model name {SCAL-□S (P)} with the same digit in □ are interchangeable regardless ofend configurations.

(mm2)

Min. Cross-Sectional Area
Model(SCAL-)

2S (-NPT)×
2P (-NPT)

3S (-NPT)×
3P (-NPT)

4S (-NPT)×
4P (-NPT)

6S (-NPT)×
6P (-NPT)

8S (-NPT)×
8P (-NPT)

12S (-NPT/-FL-P)×
12P (-NPT/-FL-P)

2441

59

108234

611

Min. Cross-Sectional Area

Volume of Spillage per Disconnection Volume of spillage may vary depending upon the usage conditions. (mL)Model(SCAL-)

2S (-NPT)×
2P (-NPT)

3S (-NPT)×
3P (-NPT)

4S (-NPT)×
4P (-NPT)

6S (-NPT)×
6P (-NPT)

8S (-NPT)×
8P (-NPT)

12S (-NPT/-FL-P)×
12P (-NPT/-FL-P)

0.07

0.09

0.13

0.20

0.59

1.26

Volume of spillage

Flow Rate – Pressure Loss Characteristics• Fluid : Water • Temperature : 20˚C ± 5˚C[Test conditions]

1.0 {10}

Pressure loss in MPa {kgf/cm2}

0.2 MPa{2 kgf/cm2}With seal tape wrapped on the male thread, screw it firmly by hand, and then add more
tightening with a wrench as shown below.

0.1 {1}

SCAL-2S × SCAL-2P
SCAL-3S × SCAL-3P
SCAL-4S × SCAL-4P
SCAL-6S × SCAL-6P
SCAL-8S × SCAL-8P
SCAL-12S × SCAL-12P

0.01 {0.1}0.001 {0.01}
1Flange type

10100

Models and Dimensions

Plug

WAF : WAF stands for width across flats.

Female thread

SocketFemale thread
T

D

DTLLH
Model1000

Flow rate in L/min

Mass (g)SCAL-2P
SCAL-2P-NPT
SCAL-3PSCAL-3P-NPT
SCAL-4P
SCAL-4P-NPT
SCAL-6P
SCAL-6P-NPT
SCAL-8P
SCAL-8P-NPT*SCAL-12P-NPT*Made-to-order item

Dimensions (mm)LøD

H(WAF)

3750

27.5

2473

63

34.5

30

107

72

39.5

36

153

77

48

41348

109

5950740

126

8075

T
Rc 1/4
1/4-18NPT
Rc 3/83/8-18NPT
Rc 1/2
1/2-14NPT
Rc 3/4
3/4-14NPT
Rc 1
1-11.5NPT
1 1/2-11.5NPT

Model

SCAL-2S
SCAL-2S-NPT
SCAL-3S
SCAL-3S-NPT
SCAL-4S
SCAL-4S-NPT
SCAL-6S
SCAL-6S-NPT
SCAL-8S
SCAL-8S-NPT*SCAL-12S-NPT

Mass (g)H

Dimensions (mm)LøD

H(WAF)

97( 60.5)

40.527135( 69.5)

4732

177( 76 )5236339( 90 )

65

46656(109 )

80

60

1580

(144.5)108

80

T
Rc 1/4
1/4-18NPT
Rc 3/83/8-18NPT
Rc 1/2
1/2-14NPT
Rc 3/4
3/4-14NPT
Rc 1
1-11.5NPT
1 1/2-11.5NPT*Made-to-order item

• Plug comes with a cap made of high density polyethylene (HDPE).
• Outer appearance of NPT thread type differs slightly from that of the above.
• Please contact us about end configurations other than female thread such as flange and male thread. • Excessive tightening will damage the threaded part and result in leakage.
• Note: A very small amount of gas can permeate polytetrafluoroethylene (PTFE) bellows in the socket.
Before use, please be sure to read “Safety Guide” described at the end of this book and “Instruction Sheet” that comes with the products.

127