Non-contact Measuring Microscope

HisometII / XYZ Measurement
Model: DHII

Focal surface
Just focus condition

Defocused condition

Black-stripe Target MarkWhite-stripe Target MarkUrsamet / XY Measurement
Model: SMG

XYZ Measuring Microscope “HisometII”
Model: DHII
Principle of measurement
This microscope system offers a precise focus indicator consisting of an index graticule (Target Mark) and a beam
splitting prism built into reflecting illumination optical system of microscope. And it has been designed based on
the optical principle that at just focus status, of which the upper and lower halves coincide, can be observed
above the focused image of a specimen, and that when defocused even slightly, the index line is split into twolines in the upper and lower halves of the graticule.

Defocused condition

DHII

Just focus condition

Light Source

Beam Splitting Prism(Target Mark)

Projection lens for Target Mark

Objective

Method of measurement
An exact focal point is secured by confirming that the vertical index lines in theupper and lower halves of the graticule coincide with both of straight lines
exactly, rather than by making judgements as to whether image of a specimen
surface is blurred or not.
Since this is a unique system that is neither affected by the focal depth ofobjective lenses nor dependent on the ability of the human eyes to discriminate
two points, a focal point can be determined very accurately as compared withother focusing systems.
This focusing system and the digital gauge allow non-contact, high precision
measurements of step heights between surfaces.
1Advantages
As a focal point is detected under the non-contact optical method, measurements can be taken without being affectedby physical damages to a specimen such as distortion, blow or nicks, etc.˄Refer to Diagram-①˅
Ƶ Since the precise focus indicator based on the “split-target” method has been adopted, highly-accurate depth
measurements can be taken simply by coinciding the two halves of the graticule.
Ƶ As the operation is so simple, this is the most suitable measuring microscope system for various kinds of applications.
ƵWhile observing minute surface condition of a point of measurement, the positional relation between a reference pointof measurement and a point of measurement can be confirmed, and measurements can be also taken in the same fieldof view.˄Refer to Diagram-②˅
Ƶ Measurement accuracy can be improved through the use of high magnification objective lenses.˄Refer toDiagram-③˅Ƶ Either Black-stripe or White-stripe Target Mark can be chosen as per a condition of specimen surface. Since three kindsof Target Mark status (black-stripe, while-stripe and nothing) can be selected by a lever, the photographs can be taken
without the Target Mark if necessary.
Ƶ Various models can be configured by the combination of different equipment such as viewing head, measuring stage
and other optional items, depending on applications of respective users. (Refer to System Diagram)ƵDHIIƵ

In case of observing transparent, mirror or pearskin finish surfaces with a laser system, focus errors are apt to occur due
to diffuse reflection. While, Target Mark can be projected onto such surfaces in case of our optical system, step heights
of such specimen surfaces can be measured.
①

Optical system

Contact system②

A reference point ofmeasurement

A point ofmeasurement

Cross section diagram

Display screen③ Example: measuring height of bonding wire

Through 40X

Through 100X

2DHII

Options for special applicaion

Measurement can be done within the same field of viewNo need using XY stage
Reduction of emasurement time3

SPECIFICATIONS
Coarse Adjustable
Fine Adjustable
Height of specimen
Measuring
Accuracy
Reflecting
Transmitted
Erected Trinocular

140mm
25mm
150mm (Max.)
0.1um, 0.5um and 1um (option) reading / 25mm travel
3 ˪ =1um (using 40X objective)

Travel

Z-axisIlluminator
Vewing HeadObjective
Eyepiece

3W White LED
Binocular with TV C-mount tube
3X, 5X, 10X, 20X, 40X, 50X, 100X
Field number : Ø160505
Ø 150mm
50×50mm
360°

1005
170x120mm
100×50mm

10101515

Ø 205mm
100×100mm

Ø 260mm
150×150mm

2010
280x170mm
200×100mm

2020
290x290mm
200×200mm

3015
370x220mm
300×150mm3030
370x370mm
300×300mm

X : (4+0.02L) um, Y : (4+0.02L) um, L : Travel distance (mm)
360°
360°

DHII

Size of stage glass
Measuring Stage Travel (X - Y)
Accuracy
Rotation angle
Stage size

210×210×95mm 270×210×95mm 270×270×95mm 320×320×95mm 430×270×95mm 430×430×95mm 520×320×95mm 520×520×109mm

COMPOSITIONDHII
Name

Code
S05-BEB
S06-BEC

Base & Column
S07-BEE
S07-BEF

Optical Unit

S05-300

S02-X01-G02A
S02-X01-G03A
Target Mark
S02-X01-G04A(Choose 2 marks)
S02-X01-G05A
S02-X01-G06A
R01-110-G01A
R01-111-G01A
ReticleR01-112-G01A
R01-113-G01A
R01-114-G01A
B07-003
B07-005
B07-010
B59-003
B59-010
Objective
B59-020
B59-040
B59-100
B04-050
B04-100
S02-MZE (0.5um)
Z axis scale
S02-MZF (0.1um)
A82-505 (0.25um)
A83-505 (0.1um)
A82-105 (0.25um)
A83-105 (0.1um)
A82-110 (0.25um)
A83-110 (0.1um)
A82-150 (0.25um)
A83-150 (0.1um)
Stage
A82-210 (0.25um)
A83-210 (0.1um)
A82-220 (0.25um)
A83-220 (0.1um)
A82-315 (0.25um)
A83-315 (0.1um)
A82-330 (0.25um)
A83-330 (0.1um)
XYZ counter
M5D-051-123A
Reflecting LED Light
M5E-031-240A
Transmitted LED Light M5E-031-241A

Description
For stage 0505, 1005, 1010, 2010
with reflecting & transmitted LED controller
For stage 1515, 3015
with reflecting & transmitted LED controller
For stage 2020
with reflecting & transmitted LED controller
For stage 3030
with reflecting & transmitted LED controller
Bracket with target markViewing head with C-mount
Nosepiece for 4 objectives
Pair of eyepieces, field number Ø16Black-stripe
White-stripe
Multiline
Triserial black-stripe
Triserial white-stripe
With Ø16 frameWith Ø16 frameWith Ø16 frame & 10mm dividing equally into 100
With Ø16 frameWith Ø16 frame
PLM3X / N.A. 0.075 W.D. 8.5mm
PLM5X / N.A. 0.1 W.D. 19.8mm
PLM10X / N.A. 0.2 W.D. 12.0mm
PLLM3X / N.A.0.075 W.D. 29.5mm
PLLWDM10X / N.A. 0.2 W.D. 24.3mm
PLLWDM20X / N.A. 0.4 W.D. 11.2mm
PLLWDM40X / N.A. 0.5 W.D. 10.0mm
PLLWDM100X / N.A. 0.73 W.D. 5.0mm
SPLM50X / N.A. 0.75 W.D. 1.5mm
SPLM100X / N.A. 0.9 W.D. 1.0mm
Digital linear scale, 25mm travelindicator with adapter
50x50mm travel with digital linear
scale, rotary table and stage glass
100x50mm travel with digital linear
scale and stage glass
100x100mm travel with digital
linear scale, rotary table and stage glass
150x150mm travel with digital
linear scale, rotary table and stage glass
200x100mm travel with digital
linear scale and stage glass
200x200mm travel with digital
linear scale and stage glass
300x150mm travel with digital
linear scale and stage glass
300x300mm travel with digital
linear scale and stage glass
Digital XYZ counter with RS232C output
3W White LED spot light
3W White LED spot light0505 1005 1010 1515 2010 2020 3015 3030

4

SYSTEM DIAGRAM

LED Illuminator(Reflecting)DHII

M5E-031-240A

Target Mark

S02-X01-G02A

Optical Unit

S02-X01-G03A

S02-X01-G04A

S02-X01-G05A

S02-X01-G06A

M
SReticle
R01-110-G01A

R01-111-G01A

R01-112-G01A

B
R01-113-G01A
R01-114-G01A

Objective
5

B07-003
B07-005
B07-010
B59-003

B59-010
B59-020
B59-040
B59-100

B04-050
B04-100

Measuring
Software

MonitorPC

CCD CameraDHII

XYZ Counter

Z axis Measuring ScaleX
YXY

S02-MZE
S02-MZF

Z

Z

784

56

123+-0
129

M5D-051-123A

OptionA82-330
A83-330

A82-220
A83-220

A82-315
A83-315
S07-BEF
A82-150
A83-150

MeasuringStage

S07-BEE
A82-105
A83-105
A82-210
A83-210
A82-505
A83-505
A82-110
A83-110

S06-BECBase & Column
S05-BEBLED Illuminator(Transmitted)

M5E-031-241A

6

APPLICATIONS˘Height of lead frame˚˘Height of IC probe˚

DHII˄To see how much the probe tip is worn out.˅

Before endurance test. After endurance test of 1mil. times.

˘Height of bonding wire and solder ball˚˘Terminal steps on multi-layer PC boards˚

Height of bonding wire.

Height of solder ball.

˘Steps on wafers such as Si and GaAs˚

˘Steps on quartz crystal˚˘Recess on the can˚˘Thickness of spacer˚
Fluorescent light
Reflective film
Back light

TFT
Glass substrate

Glass substrate

7

XY Measuring Microscope “Ursamet”
Model: SMG
SPECIFICATIONS
140mm
25mm
150mm (Max.)

Coarse Adjustable
Fine Adjustable
Height of specimen
Reflecting
Transmitted
Erected TrinocularTravel

Z-axisIlluminator
Vewing Head
Objective
Eyepiece

0505
Ø150mm
50×50mm
360°

1005
170x120mm
100×50mm1010
Ø 205mm
100×100mm

1515
Ø260mm
150×150mm

2010
280x170mm
200×100mm

2020
290x290mm
200×200mm

3015
370x220mm
300×150mm3030
370x370mm
300×300mm

SMG

Size of stage glass
Measuring Stage Travel (X - Y)
Accuracy
Rotation angle
Stage size

3W White LEDBinocular with TV C-mount tube
3X, 5X, 10X, 20X, 40X, 50X, 100X
Field number : Ø24 / Ø18

X : (4+0.02L) um, Y : (4+0.02L) um, L : Travel distance (mm)
360°
360°

210×210×95mm 270×210×95mm 270×270×95mm 320×320×95mm 430×270×95mm 430×430×95mm 520×320×95mm 520×520×109mm

COMPOSITION
SMG
Name

Code
S05-BEB
S06-BEC

Base & Column
S07-BEE
S07-BEF
S21-300 (Ø24)
Optical Unit
S22-300 (Ø18)
R01-210-G01A
R01-110-G01A
R01-211-G01A
R01-111-G01A
ReticleR01-212-G01A
R01-112-G01A
R01-213-G01A
R01-113-G01A
B07-003
B07-005
B07-010
B59-003
B59-010
Objective
B59-020
B59-040
B59-100
B04-050
B04-100
A82-505 (0.25um)
A83-505 (0.1um)
A82-105 (0.25um)
A83-105 (0.1um)
A82-110 (0.25um)
A83-110 (0.1um)
A82-150 (0.25um)
A83-150 (0.1um)
Stage
A82-210 (0.25um)
A83-210 (0.1um)
A82-220 (0.25um)
A83-220 (0.1um)
A82-315 (0.25um)
A83-315 (0.1um)
A82-330 (0.25um)
A83-330 (0.1um)
XYZ counter
M5D-051-122A
Reflecting LED Light
M5E-031-240A
Transmitted LED Light M5E-031-241A

Description0505 1005 1010 1515 2010 2020 3015 3030
For stage 0505, 1005, 1010, 2010
with reflecting & transmitted LED controller
For stage 1515, 3015
with reflecting & transmitted LED controller
For stage 2020
with reflecting & transmitted LED controller
For stage 3030
with reflecting & transmitted LED controller
BracketViewing head with C-mount
Nosepiece for 4 objectives
Pair of eyepieces, field number Ø24 / Ø18
With Ø24 frameWith Ø18 frameWith Ø24 frameWith Ø18 frameWith Ø24 frame & 10mm dividing equally into 100
With Ø18 frame& 10mm dividing equally into 100
With Ø24 frameWith Ø18 frame
PLM3X / N.A. 0.075 W.D. 8.5mm
PLM5X / N.A. 0.1 W.D. 19.8mm
PLM10X / N.A. 0.2 W.D. 12.0mm
PLLM3X / N.A.0.075 W.D. 29.5mm
PLLWDM10X / N.A. 0.2 W.D. 24.3mm
PLLWDM20X / N.A. 0.4 W.D. 11.2mm
PLLWDM40X / N.A. 0.5 W.D. 10.0mm
PLLWDM100X / N.A. 0.73 W.D. 5.0mm
SPLM50X / N.A. 0.75 W.D. 1.5mm
SPLM100X / N.A. 0.9 W.D. 1.0mm
50x50mm travel with digital linear
scale, rotary table and stage glass
100x50mm travel with digital linear
scale and stage glass
100x100mm travel with digital
linear scale, rotary table and stage glass
150x150mm travel with digital
linear scale, rotary table and stage glass
200x100mm travel with digital
linear scale and stage glass
200x200mm travel with digital
linear scale and stage glass
300x150mm travel with digital
linear scale and stage glass
300x300mm travel with digital
linear scale and stage glass
Digital XYZ counter with RS232C output
3W White LED spot light
3W White LED spot light8

SYSTEM DIAGRAM

SMG

LED Illuminator(Reflecting)

M5E-031-240AOptical Unit

ReticleR01-210-G01A
R01-110-G01A
R01-211-G01A
R01-111-G01A
R01-212-G01A
R01-112-G01A
R01-213-G01A
R01-113-G01A

Objective
B07-003
B07-005
B07-010
B59-003

9B59-010
B59-020
B59-040
B59-100

B04-050
B04-100

Measuring
Software

MonitorPC

CCD CameraSMG

XY Counter
X
YX
YZ

784

5

6

123+-0
12

9

M5D-051-122A

A82-330
A83-330

A82-220
A83-220

A82-315
A83-315

S07-BEF

A82-150
A83-150

MeasuringStage

S07-BEE
A82-105
A83-105
A82-210
A83-210
A82-505
A83-505
A82-110
A83-110

S06-BEC

Base & Column
S05-BEBLED Illuminator(Transmitted)

M5E-031-241A

10

$&External Dimensions#%

DHII & SMG

0505

1005

1010

1515

2010

2020

3015

3030

A

300

300

300

350

300

430

350

430

195

195

195

195

195

195

195

209

C

440

440

440

530

440

670

530

820

D

515

515

515

530

515

530

530

520

58

61

63

91

69

137

101

169

Bmm

Weight(approx.)

kgs.

Stages505ǃ110ǃ150

105、210、315

220、330ƽAll specifications are subject to change without prior notice.

UNION OPTICAL CO., LTD.

 2-22-4, Shingashi, Itabashi-Ku, Tokyo 175-0081 Japan
Tel : 81-3-5997-8531 Fax : 81-3-5997-8532
E-mail: new-union@union.co.jp
URL: http://www.union.co.jp