MMC Activities..............1Fine MEMS Pj...............5Column.......................6Overseas Trends............7
Member’s Profiles .........8

MMC Activities

Overview of Project Planning for Fiscal 2007
I. Basic Objectives of Activities
The Micromachine Center works to establish basictechnologies relating to the micromachine, Micro Electro
Mechanical Systems (MEMS) and other micro-nano fields. TheCenter actively promotes relevant technical development
projects of the national government and the New Energy andIndustrial Technology Development Organization (NEDO). At
the same time, the Center is also actively engaged inenvironmental improvement activities aimed at theindustrialization of the micro-nano field (including policy
proposal projects, industry interchange and stimulation
projects, research projects, projects to promote standardizationand publicity projects) in order to promote dissemination andindustrialization of these basic technologies and thus make acontribution to both the growth of Japanese industry and theinternational community.
In 2007, the Micromachine Center will continue to actively
promote the High Integration/Combination MEMS Production
Technology Development Project. (nicknamed the Fine MEMS
Project), a three-year project that began last year. The Center
will also build a support organization for the MEMS OpenNetwork Engineering System of Design Tools Project(nicknamed the MEMS-ONE Project), for which development
was completed in March 2007, and will shift to publicizing theachievements of this project. With regard to activities toimprove the environment for industrialization, beginning with
policy proposal activities and industry interchange/stimulation
projects on the part of the MEMS Industry Forum that wasestablished last year, the Center will continue to actively
promote projects from last year including research projects,
projects to promote standardization and publicity projects.

II. Description of Primary Activities
1. National/NEDO Project-related Activities
In order to establish basic technologies relating tomicromachines and MEMS, the Center has actively promoted
research and development projects led by the nationalgovernment and NEDO, combining the capabilities of industry,government and academia. In 2007, the Center will vigorously
promote the High Integration/Combination MEMS Production
Technology Development Project (Fine MEMS Project), a
three-year project initiated in 2006. The Center will also
actively promote dissemination of MemsONE, the research anddevelopment achievement of the MEMS Open Network
Engineering System of Design Tools (MEMS-ONE Project), a
national government/NEDO project that was concluded inMarch 2007.
(1) High Integration/Combination MEMS Production
Technology Development Project (Fine MEMSProject) (NEDO)The Center will continue to promote this project, initiated in2006 as a national project, and carry out the plans to prepare ahigh integration/combination MEMS knowledge database thatcollects, organizes, and arranges knowledge information relatedparticularly to 3 issues in the development of concentration/combination MEMS: (1) combination of MEMS and nanofunctions, (2) integration of MEMS and semiconductors, and (3)MEMS and MEMS high integration unification. A web-based
database system in particular will make it easy for researchers

Internet Home Page : http://www.mmc.or.jp/

participating in the project to enter data, and this will help toincrease the number of database entries and make the content
more complete. In addition, the Center will continue to assist in
overall management of this project in cooperation with NEDO,
and will actively publicize midterm achievements using
opportunities such as this year's Exhibition MICROMACHINE.
(2) Dissemination of MemsONE
The MEMS Open Network Engineering System of DesignTools (MemsONE) Project was concluded in March 2007. TheCenter will establish a MemsONE Support Center to promote
MemsONE – the research and development achievement of theMemsONE Project. The MemsONE Support Center will
vigorously publicize MemsONE in cooperation with the MEMS
Industry Forum.

2. Activities of the MEMS Council (Policy Proposals,Industry Exchange, Revitalization Activities)
The MEMS Counsil was established in April of last year forthe purpose of providing further support for the MEMS
industry. Comprising MEMS-related businesses, the MEMS
Council aims to promote policy proposal, industry activities,
and revitalization activities, thus contributing to thestrengthening of the international competitiveness of the MEMS
industry in Japan.
(1) Policy Proposals
Through exchanges of opinion between MEMS Council
members and representatives of the government and MEMSrelated industries at MEMS Council Promotion Committee
meetings, as well as by holding MEMS forums, the MMC willproactively present proposals concerning MEMS policies.
(2) Coordination with Industry and AcademiaInterested business members will gather together for study
groups on particular topics. In order to promote development ofthe bedrock state-of-the-art micro-nano technologies for which
wide-ranging applications are anticipated, the “Micro/NanoCutting Edge Technology Exchange” will be once again held
this year (as last year) as venues for the exchange ofinformation and in order to stimulate joint research. The MEMS
Council will also work with the Standardization Committee topromote standardization activities.
(3) Preparation of an Infrastructure for MEMS
Development(i) Expansion and Strengthening of a Foundry Network System(ii) Promoting the Diffusion of MemsONE(iii) Strengthening of Coordination between Public Foundriesin Each Region and Regional Clusters(iv) Promotion of Human Resource Training(4) MEMS Business Exchange in Japan and Abroad(i) Establishment of an MEMS Mall(ii)Hosting “MicroNano 2007”
To promote industry interchange in the micromachine/MEMS
field, as last year, a series of events entitled “MicroNano 2007”
will be held. The events will comprise Exhibition
MICROMACHINE, a trade show for micro/MEMS andnanotechnologies; the MEMS Forum; the International
Micromachine/Nanotech Symposium; and the Presentation ofNational Government/NEDO Project Results. The series of events
will be held July 25 - 27, 2007 at Tokyo Big Sight.
(iii) Participation in the 13th World Micromachine Summit
The Center will participate in the 13th World Micromachine
Summit, which will be held in the Italian city of Venice fromApril 25 - 29 this year, taking part in discussions of a wide rangeof topics, including worldwide trends in micromachinetechnology and its fields of application.
(iv) Building of an International Network of Affiliates(v) Dispatch of overseas missions and exchange of researchers(5) Creation of JIS standard for thin film material tension
test method
A study will be conducted with the objective of creating a JIS
standard for the tension test method and standard test specimens
for which IEC standards were established in 2006.

3. Survey Research Activities

5. Publicity projects

The Center conducts research relating to micromachine andMEMS technologies that are gradually becoming key
manufacturing technologies, in order to accurately determine
technical and industry trends and study new technical issues indomains in which these technologies are fused withnanotechnology.
(1) Implementation of research relating to the BEANS
Project
The Center will establish a BEANS Project Review Committeewith the aim of making the Bio & Electro-mechanical Autonomous
Nano Systems (BEANS) Project a national project. BEANS was
the achievement of a MEMS frontier project implemented in 2006
to study future device technologies that are expected to becreated through fusion with nano-bio technologies. TheCommittee will study the project scheme, organization, research
topic content and so on.
(2) Study of national and international technical trends
This year as well, the Center will determine, from a fixed
perspective, the technical and research trends in the micro-nanofields that are experiencing dramatic technical progress both athome and abroad. In addition, work will continue on the compilingof a database that is basic to, and critical for, future process inmicromachine technologies.
(3) Survey of industry trends
The Survey Research on the Analysis of the Current
Conditions in MEMS Related Markets and Japan’s Competitivenesswas implemented last year. This year, an exchange of views will beheld with overseas affiliates in the MEMS Industry Forum
regarding the MEMS market, and a study of last year's market
trends and the current status as well as future prospects will becompleted. Information-gathering and analysis will also be
conducted with regard to various issues relating to futuretechnical development.
(4) Enhancing the Micro/Nano Database
The MMC website database will be further enhanced to enablesupporting members to search for publicly disclosed documents
and survey reports, research center maps, mini-research reports,and other information.

Efforts will be made to achieve wide-ranging disseminationand education regarding micromachines and MEMS through thepublication and distribution of brochures, the holding ofexhibitions and so on. Furthermore, information and documentson micro/nano-machine use in universities, industries, and publicorganizations in Japan and overseas will be collected, combinedwith survey results and MCC-produced documents, and madefreely available in the MMC library. At the same time, information
will be disseminated widely, both domestically and internationally,through the MCC website.
(1) Improved Dissemination and Exchange of Information
through the MCC Website
Utilizing the MCC website, efforts to exchange anddisseminate information will be made proactively. Website content
aimed at supporting members will be enhanced.
(2) Publication of a Micro/Nano Public Relations Magazine
A public relations magazine will be published periodically anddistributed to those in or connected with the field; it will also bemade available on the Internet through the Center’s home page.
(3) Publication of a Monthly Newsletter
Information concerning research and governmental trends
related to micro- and nano-machines is distributed monthly via the“MMC/MIG News” to supporting members, MEMS Councilmembers, and other interested individual and organizations.
(4) Provision of Information through the MicroNano
Express Newsletter
Through the MicroNano Mailing list, information concerning
micro/nano-machine events or industry-academia-government
collaboration is distributed as required via the “MicroNanoExpress” newsletter to supporting members, MEMS Council
members, and other interested individual and organizations.
(5) Maintaining and Upgrading the MMC Library by
Expanding the Literature Abstract Database“Micromachine Index,” an information magazine containing
abstracts of technical documents and information on materials, isissued on a regular basis and provided to supporting members andorganizations concerned with micromachines. Collected technicaldocuments and materials are stored and maintained in the MMC
library and made available to the general public.
(6) Hosting “Exhibition MICROMACHINE/MEMS”
The 18 t h International Trade Show for Micro/MEMS &Nanotechnologies will be held as part of a series of events entitled“MicroNano 2007.” The trade show will feature exhibits of stateof-the-art products, manufacturing materials and so on relating tothe micromachine and MEMS industry, and it will also serve as aforum for presenting the latest research achievements. Due tovenue scheduling circumstances, this year the venue will change
from Tokyo International Forum to Tokyo Big Sight. The series ofevents will be held from Wednesday, July 26, 2007 to Friday, July27, 2007.

4. Projects to promote standardization
International initiatives to promote standardization in themicromachine/MEMS technology field will be pursued.
(1) Study of standardization
In 2006, a road map for standardization was established toserve as a guide for international standardization andnormalization, which will be needed to strengthen MEMS
international competitiveness and international deployment basedon this competitiveness. In 2007, efforts will focus on basic
common fields and device fields in accordance with this road map,and detailed study leading to the creation of draft standards will
be conducted.
(2) Research and development to authenticate the criteria
for proposing international standards
In 2006, accelerated life testing of the mechanisms andmaterials for MEMS devices was initiated, in addition to researchand development of calibration materials for characteristic
evaluation tests of MEMS mechanisms and materials with theobjective of standardization. In 2007, the primary focus willcontinue to be on acquiring basic data for establishing draftstandards.
(3) Follow-up for proposed Thin Film Material Fatigue
Test Method
Follow-up activities aimed at international standardization will
be conducted for the NP (New Work Item Proposal) fatigue test
proposed in 2006.
(4) Study of overseas standards
A study will be conducted to determine how Japan canaccommodate the rapidly increasing number of proposed MEMS
standards in Korea and other overseas countries (relating to RFMEMS, bonding and packaging).

“MicroNano 2007” Events
1. Exhibition MICROMACHINE: The 18th International
Trade Show for Micro/MEMS & Nanotechnologies
July 25, 2007 (Wednesday) - July 27, 2007 (Friday)
Tokyo Big Sight (West Hall 3 & 4)

2. 2nd MEMS Forum
July 25, 2007 (Wednesday)
Tokyo Big Sight (West Hall 3 & 4)

3. 13th International Micromachine / Nanotech Symposium
July 26, 2007 (Thursday)Tokyo Bay Ariake Washington Hotel (Iris)

4. National Government / NEDO Project Achievements
July 27, 2007 (Friday)
Tokyo Big Sight (West Hall 3 & 4)

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