QUICK VISION ULTRA

Catalog No.E14002

Vision Measuring Systems

Ultra-high Accuracy CNC Vision Measuring System

The ultimate Vision Measuring System with
best-in-class speed and accuracy
A d v an c e d Te c h n o l o g i e s Su p p o r t i n g U l t r aH i g h - a c c u r a c y Sys t e m s

Optimal Structural Design through FEM Analysis

Main Body Structure Appropriate for High-accuracy Systems

Tracking Auto Focus (TAF)

Structural design is optimized throughthe use of infinite element method (FEM)
analysis. This results in maximum rigidity
for minimum weight, minimizing
deformations due to loading andguaranteeing excellent geometricalaccuracy at all times.

The moving structure of a fixed bridge
table employed for QV ULTRA makes
the X axis and Y axis completely
independent of each other, providing
the feature that the moving accuracyof each axis is not easily affected by theother. The X-axis and Y-axis guides are
made of granite for excellent abrasion
resistance and thermal stability.

Self-suction Air Pad

Ball Screw Floating Mechanism

If a normal air pad is used for the Y axis, it is necessary to increase
the mass of the work stage to obtain appropriate rigidity. QVULTRA (Quick Vision) employs a special air pad called a self-suction
type that floats the air pad with compressed air and also generates
an absorption power with a vacuum zone provided under negative
pressure at the center of the pad. This achieves greater Y-axis
rigidity and stage weight reduction
concurrently, thus enabling stable stagedrive.

QV ULTRA employs high-reliability ball screws in the floating
mechanism. This floating mechanism will minimize the error due toaxial fluctuation that adversely affects kinetic performance such as
straightness and improve
Ball Screw
Pulse Generator
the driving speed.

The TAF feature focuses continuously, adjusting tochanges in the height of the object being measured.
Automatic tracking of surface waves and warpage (inthe Z axis height
Automatic Z-axis tracking Objects
direction)
improves
measurement
Parfocalthroughput. The
Parfocalfeature also
Surface of workpieceeliminates thehassle of focusing
during manual measurement.

Suction
Air padVacuum suction region

2

Floating Mechanism
Guide Block
Nut

Laser source
Semiconductor laser (peak wavelength: 690nm)
Laser safety
Class2 (JIS C6802:2014, EN/IEC60825-1:2014+A11:2021)
Auto-focus principle Objective coaxial autofocusing (knife-edge method)
Applicable objectives QV-HR1x QV-SL1x QV-HR2.5x QV-SL2.5x QV-5x
6.3 mm 6.3 mm 1 mm 1 mm 0.25 mm
Tracking range*(±3.15 mm) (±3.15 mm) (±0.5 mm) (±0.5 mm) (±0.125 mm)* When performing a tracking range, please set the upper and lower
software limit to prevent collision with workpieces. Tracking range
differs depending on the surface texture and reflection ratio.

High-accuracy, High-resolution Scale

Compressed air Compressed air
Guide plane

Servomotor

Note: Continuous measurement of displacement is not available.

The length measuring systems, standard for individual axes, areequipped with a high-resolution linear encoder system with a resolutionof 0.01μm, respectively, which was uniquely developed by Mitutoyo.
This scale uses crystal glass as its material, of which the thermal
expansion coefficient equals nearly zero, to minimize the scale
expansion and contraction due to change in temperature and offer
higher reliability measurement data.

Temperature Compensation Function

Air Server

The thermometer unit installed in the main body reads temperaturesat each axis and calculates the amount of expansion and contractionof the body to compensate the measuring accuracy. This function
allows the accuracy to be guaranteed in a wide range of 19 to 24˚C.
Additionally, the thermometer unit measures workpiecetemperatures with two sensors in real time, outputting the results inwhich dimensions are converted to those at 20˚C.

To avoid the adverse effect of supplied
air temperature on the measuringsystem structure, the air server supplies
air always maintained at a constanttemperature.

3

PERFORMANCESOFTWARE

High-performance image auto focus

QVPAK

The image auto focus of QUICK VISION can measure the height of mirror-finished to rough surfaces, such as machined surfaces and plastic molded parts, withhigh accuracy and at high speed under any condition.

The X, Y, and Z position data is detected from the measurement data gathered by the QUICK VISION system and the arithmetic processing of coordinates and dimensions is performed immediately.

IC package

Pattern focus

Multi-point auto focus

By projecting a pattern through the optical path, auto focus can be applied toeven surfaces on which it is difficult to obtain contrast, such as glass surfaces,
film surfaces, and mirror-finished surfaces used widely for semiconductor parts.

Multi-point auto focus can be used to set multiple focus positions, sizes, and angles toindependent locations. This tool can be used to obtain multiple sets of height
information with a single focus operation, which makes it possible to perform highlyefficient height and flatness measurements.

Highly Functional Illumination Unit

· QUICK VISION uses LEDs for all of its light sources: coaxial, stage, and programmable ring light.
· Lighting uniformity has been achieved at a high level, which leads to excellent partprogram compatibility between multiple QUICK VISION machines.
· LED light sources have excellent responsiveness, which improves measurement throughput.
· LED light sources have longer life spans than halogen types, which reduces illumination
fluctuations and thereby minimizes any errors caused by changes in light intensity.

Programmable ring light

Programmable ring lightStage lightStage light

Programmable Ring Light (PRL)
Changing the positions of the two curved mirrors sets the ring light's direction to any chosen value
between 30° and 80°. This is effective for enhancing the edges of inclined surfaces or very small steps.
Furthermore, the PRL light's illumination can be controlled independently in every direction, front andback, right and left. This makes it possible to configure highly variable lighting settings to matchmeasurement locations.

Programmable Power Turret
QUICK VISION's programmable power turret has excellent magnification repeatability
which makes it suited for highly accurate measurements.
The standard specification permits three steps of magnification: 1x, 2x and 6x*.
The rich lineup of objectives includes lenses with magnifications ranging from 0.5x to 25x,
which makes it possible to select the optimal optical system to match the measurementtarget. It is possible to install additional objectives after purchase of the main unit.

When using QV-HR2.5x

Turret 1x Field of view: 2.49 × 1.86 mm Turret 2x Field of view: 1.24 × 0.93 mm* Also available as special options: three or four steps of magnification: 1x, 2x, 4x and 6x.

Digital Magnification NEW
Four-step magnification can be obtained, namely 1x, 2x, 6x and with a new 12x
digital magnification. As a special option, six-step magnification is available with 1x,2x, 4x, 6x and new 8x and 12x digital magnification.

4PointLine

CirclePlane

Sphere Stepped Cylinder
cylinderConeBufferLine of Midpoint Middle line
Angle Distance Point ofintersection intersection

Vertical coaxial lightStage surface

Vertical coaxial lightExamples of computational
capabilities

OPTIONAL SOFTWAREFORMTRACEPAK-AP

QV3DCADF o r m E v a lu a t io n a n d A n a ly s is S o ftw a reContour Tolerancing Function· Design data creation
CAD data conversion, master workpiece conversion, function specification,text file conversion, and aspherical surface design value creation· Tolerancing
Normal vector direction tolerancing, axial direction tolerancing, and best-fit tolerancing·Result display
Result listing, error graph, error developed view, error coordinate value display function, analysis result display

Microscopic Form Analysis

Report Creation Function· Analyzed items: point measurement, linemeasurement, circle measurement, distancemeasurement, intersection measurement, angle
measurement, origin setting, and axial rotation· Calculated items: maximum, minimum, average,
standard deviation, and area

· Measurement result, error graph,and error developed view

QV3DCAD creates a QVPAK part program from a 3D CAD model.
The current version supports two modes: the online mode that allows youto teach while monitoring the actual workpiece by synchronizing thesoftware with the QV system, and the offline mode that allows you tocreate a part program on a PC not connected to the main unit.

Other Functions· Recording and executing analysis
procedures· External output function:
CSV, text or DXF/IGES format
output· Fairing process· Quadratic curve fitting function· Q u a s i - ro u g h n e s s a n a l y s i sfunction

Offline teaching mode

Online teaching mode

Turret 6x Field of view: 0.41 × 0.31 mm Digital magnification 12x Field of view: 0.20 × 0.15 mm

5PFF (Points From Focus) function
Scanning the object by auto focusing the objective can capture multiple cross-section images (image contrasts) at different heights. Thus obtaining 3D shapedata from such images. The Z-axis repeatability is guaranteed by Mitutoyo's inspection method, so highly-accurate shape measurement can be performed.
Generates 3D shape data by
Image contrasts QV3D function

The Z-direction repeatability isguaranteed by our inspection
method.

1172×1736×1910
493×5512150① (0.35 + 1.3L / 1000) / ② (0.35 + 1.8L / 1000)① (0.5 + 2L / 1000) / ② (0.5 + 2.5L / 1000)① (1.5 + 2L / 1000) / ② (1.5 + 3.5L / 1000)
5x objective (QV-HR5x or QV-5x) and middle magnification
0.01① 20±2 °C / ② 19 to 24 °C
0.5 ˚C/ 1H and 1 ˚C/ 24H
40
B&W CMOS digital camera
White LEDWhite LEDWhite LED
Programmable power turret 1x, 2x, 6x, (12x)*5–

Dimentions

unit: mm

Note: There are limitations on the function, depending on the lens.
For details, contact your Mitutoyo sales office.

88276
50 8850111
90

11.5 24-M6 depth 12
7.5 (Jig mounting holes)
48

111
90 50

308
50 104200 200 200
243 325 325 279
1172

200
331
2750

ColumnMeasuring range

104

Note: There are limitations on the function, depending on the lens.
For details, contact your Mitutoyo sales office.

700

This glass chart is used to perform compensation for
distortions within the screen caused by the optical system,
and auto focus compensation, which reduces auto focus
variations that are caused by differences between theworkpiece pattern and texture

11.5
7.5

156.5

1200

QV compensation chart

A calibration chart is used to compensate forthe pixel size of the camera imaging chip andfor the auto focus accuracy and optical axis
offset at each magnification of the variablemagnification unit (PPT).

✓0.4 MPa*6300 L/min (ANR)
Automatic*1 L: arbitrary measuring length (unit: mm)*2 The guaranteed accuracy depends on ambient temperature.
*3 An excessively biased or concentrated load is excluded.
*4 Programmable power turret 1x, 2x, 4x, 6x model is available by special order. Digital magnification function allows 8x and 12x in addition to 1x, 2x, 4x, 6x. 6 steps of magnification are available in total.
*5 The value in parenthesis is for digital magnification change.
*6 Air supply pressure to be in range 0.5 to 0.9 MPa.

889

Calibration chart

QV-U404T1L-E
400×400×200

1910

Objective
QV-SL0.5x*1 QV-HR1x
QV-SL1x QV-HR2.5x QV-SL2.5x QV-HR5x
QV-5x
QV-HR10x*1 QV-10x*1
QV-25x*1
Code No.
02AKT199 02AKT250 02ALA150 02AKT300 02ALA170 02AWD010 02ALA420 02AKT650 02ALG010 02ALG020
Set of objectives that support PFF–––02AKX895B–02AXA915B 02AKX900B 02AKX905B–02AKX910B
Working distance [mm]30.540.652.5
40.6
60.0
20.033.5
20.0
30.5
13.0
Turret 1x12.54x9.4
6.27x4.7
2.49x1.86
1.24x0.93
0.62x0.47
0.25x0.18
6.27x4.7
3.13x2.35
1.24x0.93
0.62x0.47
0.31x0.23
0.12x0.09
Field of view [mm]* 2 Turret 2x(H)×(V)Turret 6x
2.09x1.56
1.04x0.78
0.41x0.31
0.20x0.15
0.10x0.07
0.04x0.03
Digital magnificationq 12x 1.04x0.78
0.52x0.39
0.20x0.15
0.10x0.07
0.05x0.03
0.02x0.01*1 When the QV-SL0.5x, QV-HR10x, QV-10x, or QV-25x objective is used, some limitations, such as the illumination being insufficient depending on the workpiece, may occur.
*2 The values for field of view are not guaranteed values, but representative values.

QV-U404P1L-E

2008501736

555

Column400553649

QV Objectives

QV ULTRA

Model name
Model code
Main unit
Measuring range (X×Y×Z) [mm]External dimensions (W×D×H)(Including dedicated stand) [mm]Stage glass (W×D) [mm]Main unit mass (Including dedicated stand) [kg]EUX / EUY, MPE
EUXY, MPE
Vision measuring accuracy Vision[µm]*1
EUZ, MPE
Optical magnification
Resolution of scale [µm]Ambient temperature*2
Operating temperature
Temperature variation
Maximum stage loading [kg]*3
Imaging device
Stage light
Illumination unit
Coaxial light
PRL
Observation unit*4
Tracking Auto Focus device
Pressure
Air supply
Required air flow rate
Thermal compensation function

92.5
48

OPTIONS

Specifications

33.5

400
60.5
495
138-ø733.5 Holes for leveling bolts521
588 (Dimension between columns)

60.5

Measuring range

ColumnGlass surface
Jig fixing surface

5~7Column

13200

Note: When using PFF function, pleasepurchase QV3DPAK and theobjective for PFF (please contact usfor details).

46.5
42.5

Example ofmeasurementwith PFFIC Package: BGA

QV-U404P1L-E

124
50 103QV ULTRA
Repeatability (Z axis) 2σ≤0.7 μm
QV-5×
Accuracy-guaranteed+Optical magnification
PT2×

Workpiece: crown gear
Partition line of molded products

Measurement performance of PFF

124103 50

Scanning

Acquire images
continuously

46.5
42.5

QV optical system

PFF
principle

LINE-UP67

2307 (JP3), Printed in Japan

Coordinate Measuring Machines

Vision Measuring Systems

Form Measurement

Optical Measuring

Whatever your challenges are, Mitutoyo
supports you from start to finish.
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measuring products but one that also offers qualified
support for the lifetime of the equipment, backed up
by comprehensive services that ensure your staff canmake the very best use of the investment.
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Mitutoyo offers product and metrology training,as well as IT support for the sophisticated software
used in modern measuring technology. We can also
design, build, test and deliver measuring solutions
and even, if deemed cost-effective, take your criticalmeasurement challenges in-house on a sub-contract
basis.

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https://www.mitutoyo.co.jp/global.html
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All product information contained in this brochure is current as of July 2023.

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