Vision Measuring Systems

Non-contact 3D Measuring System
QUICK VISION WLI Pro Series

Catalog No.E14001(4)No n- c o ntact 2 D M e asurement and 3D Shape
Me a s urem e n t in a Single SystemAdv a n c e d H i g h Pr eci s i o n D u a l H e a d M e a s u r i n g Sys t e m e q u i p pe dw ith W h it e L i g h t I n t er f er ome t e r ( W LI ) O p t i c a l H e a d
Non-contact 2D/3D measurement withhigh precision and high resolutionCapable of measuring a wide varietyof surfaces

White light interferometer (WLI optical head) applied to vision
measuring systems enables a wide range of powerfulmeasurements, from 2D measurement of coordinates anddimensions, surface analysis in microscopic areas, depth
measurement of small-diameter holes, and to high-precision 3D
measurement of wiring dimensions on a printed circuit board.

In addition to online programming using 3D CAD models,
an offline program can be created from an image or with atouch probe. This makes it possible to increase up-time of
the QUICK VISION Pro main unit, thereby shortening
production lead times.

Vision optical head
WLI optical head

Metal

Plastic

Principle of WLI measurement
A white light is split into two beams, one for the reference mirror within the interference objective lens and the other for themeasurement sample. When the interference objective lens is swept in the Z-direction, white interference fringes are generated
only in the area of the measurement sample that is focused. The three dimensional shape of the object being measured iscalculated by detecting the peak position of the interference fringe intensity at each pixel position of the CCD camera.
CCD camera

Z-axis scanInterference fringes

White light
Beam splitter

Interference objective lensReference mirror
Beam splitter
Measurement target

WLI optical system head2

Measurement target

Interference fringes and intensity depiction

3

PERFORMANCEAPPLICATION

Top P e r f o r m anc e Pres ented by Continuously Evolving V isi o n
Mea su r i n g F unc ti on and A dvanced WLI Optical Head

Semiconductor package substrate

Semiconductor package substrate

Surface analysis

Cross-sectional shape measurement

Semiconductor package substrate

Metal thin film

ID and depth measurements

Surface analysis, and step measurement

Board-to-Board connector

Board-to-Board connector

Cross-sectional shape measurement

Coordinate-position, OD, and height measurements

Microscopic precision machined part

3D Surface Texture Analysis

Cross-sectional shape measurement

Surface analysis, step, and cross sectional measurements

High-efficiency measurement achieved by a single machine performing two roles
Vision optical head

Coordinate dimension measurement has inherited all of theproven vision measuring functions of Quick Vision Pro.
Switches to 3D measurements without setup changes following
vision measurement.
Seamlessly continuous measurement is made possible by Quick
Vision Pro’s automatic control.

coordinates, pitch, diameter, width, angle,etc.

WLI optical head (3D measurement)

surface analysis, cross-sectional dimensions, steps,
contour matching, etc.

Easy targeting of measurement position
Offset amount of vision optical head and WLI optical head is calibrated withhigh accuracy.
Switching to high-magnification WLI optical head after positioning withvision optical head of low magnification and a wide field of view does not
lose sight of the targeted area, thus guaranteeing a highly efficientmeasurement.

Advanced-design platform culminating from Mitutoyo’s high accuracy technology
Main frame structure boasting a large stage and high accuracy is achieved bystructure having a fixed bridge and a translation stage providing mutuallyindependent X-axis and Y-axis movements, which are advantageous forachieving high accuracy.
For added stability of measurement, a pneumatic auto-leveling vibration
isolator is provided as a standard structure.
Unique design principle of Quick Vision WLI Pro series guarantees superbvibration isolation performance.
Achieves high precision measurement for a wide range of applications, fromlong dimensions of large workpieces to minute dimensions.
Pneumatic, auto-levelingvibration isolator

45SOFTWAREQV3D Function (optional)
Synthesizes three dimensional shape data from interference fringes to display shapes or outputs point cloud data to external sources.
Point cloud data can be used for generating surfaces, as well as for outputting height, and internal/outer diameter.
Also, 3D data can be transferred to the shape/evaluation analysis software (optional) to implement shape measurement and surface analysis.

Applications
Enables you to switch from inaccurate visual inspections to accurate measurements based on automatic computation.
Diameter measurementby extracting a horizontal
cross-section

Depth
Measurement concept

3D data-synthesizing software

System-controlling main software

QV3D Function

QVPAK

Cross-section extraction concept

StepQVPAK
A function for acquiring interference fringes is added to QVPAK Software having high functionality and universal application capabilities for vision measuring systems.
The measurement procedure program prepared by QVPAK automatically controls the coordinates and dimensions in vision measurement, 3D data synthesis inWLI measurement, data output, and shape/evaluation analysis software (optional) thus providing a highly efficient measurement system.

Measurement concept

Analysis of contour shape from ZX (YZ)
cross-section extraction

Surface analysis based on 3D data
Use of FORMTRACEPAK-PRO (optional)

Use of FORMTRACEPAK-AP (optional)

3D Profile Stitching

Examples of computational capabilities

This function allows concatenation of multiple fields of 3D profile data unless only single field measurement can cover an object area to be measured.
The running of 3D profile stitching enables a wide range of measurement or analysis while maintaining a high resolution.
PointLineCircle

Plane

SphereSteppedcylinder

CylinderCone

BufferAngle

Distance

Line ofPoint of
Midpoint Middle line
intersection intersection

Versatile vision measurement

Circular toolLine tool

Auto trace tool

Pattern search tool

MSURF-I
Conducts analysis or comparison verification of measured point cloud data through QVH1 Pro/QVH4 Pro and QV WLI
Pro in reference to nominal data (supporting CAD data import).
Note: A separate PC is necessary for MSURF-I analysis.

AI illumination tool
(automatic compensation of light)

6

Multi point AF

Various filters

Geometric deviation drawing

7

OPTIONSO P T ION A L SO F T WA RE
FORMTRACEPAK-AP
F orm Ev a l u at i o n an d A n a l ys i s So f t w a r e

Contour Tolerancing Function

Report Creation Function· Design data creation
CAD data conversion, master workpiece conversion, function specification, text file conversion, and aspherical surface design value creation· Tolerancing
Normal vector direction tolerancing, axial direction tolerancing, and bestfit tolerancing· Result display
Result listing, error graph, error developed view, error coordinate value
display function, analysis result display· Measurement result, error graph, and error developed view

Microscopic Form Analysis· Analyzed items: point measurement, line measurement, circlemeasurement, distance measurement, intersection measurement, anglemeasurement, origin setting, and axial rotation· Calculated items: maximum, minimum, average, standard deviation, andarea

Other Functions· Recording and executing analysis
procedures· External output function:
CSV, text or DXF/IGES format output· Fairing process· Quadratic curve fitting function· Quasi-roughness analysis function

QV Objectives
Objective
QV-SL0.5x*1 QV-HR1x
QV-SL1x QV-HR2.5x QV-SL2.5x QV-HR5x
QV-5x
QV-HR10x*1 QV-10x*1
QV-25x*1
Code No.
02AKT199 02AKT250 02ALA150 02AKT300 02ALA170 02AWD010 02ALA420 02AKT650 02ALG010 02ALG020
Set of objectives that support PFF–––02AKX895B–02AXA915B 02AKX900B 02AKX905B–02AKX910B
Working distance [mm]
30.5
40.6
52.5
40.6
60.0
20.033.5
20.030.5
13.0
Turret 1x
12.54x9.4
6.27x4.7
2.49x1.86
1.24x0.93
0.62x0.47
0.25x0.18
6.27x4.7
3.13x2.35
1.24x0.93
0.62x0.47
0.31x0.23
0.12x0.09
Field of view [mm]* 2 Turret 2x(H)×(V)Turret 6x
2.09x1.56
1.04x0.78
0.41x0.31
0.20x0.15
0.10x0.07
0.04x0.03
Digital magnificationq 12x 1.04x0.78
0.52x0.39
0.20x0.15
0.10x0.07
0.05x0.03
0.02x0.01*1 When the QV-SL0.5x, QV-HR10x, QV-10x, or QV-25x objective is used, some limitations, such as the illumination being insufficient depending on the workpiece, may occur.
*2 The values for field of view are not guaranteed values, but representative values.

WLI interference objective lensObjective Lens

Code No.

QVWLI A-5x
QVWLI A-10x
QVWLI A-25x
QVWLI A-50x

02ALY400
02ALT630
02ALT670
02AWB150

Interference
Monitor
MethodMagnification
MirrorMirrorMirrorMirror

270x
540x
1350x
2700x

Field ofView*1(mm)0.64 x 0.48
0.32 x 0.24
0.13 x 0.100.064 x 0.048

OperatingDistance(mm)
13.2
12.6
4.7
2.4

Monitor magnification shown here is that of Size 24 Liquid Crystal Display (resolution WUXGA).
*1 Tube lens 2x is provided as a standard equipment. Also, The values for field of view and monitor
magnification are not guaranteed values, but representative values.

Collision detection unit
It is a collision prevention sensor
equipped with QVWLI.
It is available for QVWLI A-25x and QVWLI
A-50x. The collision prevention sensor contacts
stages or workpieces to stop the movement ofthe Z-axis to prevent the WLI interference
objective lens from damage.

MCubeMap
3D S ur f ac e Pr o p er t y A n a l yzi n g So f t w a r e
Clear and informative imaging of analyzed data using powerful graphicstechnology.
The software conforms to the latest ISO25178-2 3D Surface Texture
Parameter Specifications, allowing analysis of parameters such as heightof Sa, Sq, etc., space, compound and volume.
The user can easily create a graphical report where analysis results arefreely laid out.

Calibration
Tilt compensation jig for WLI optical headInterference fringe adjustment jig

Enables to compensate the mounting
posture of WLI optical head. It helps
to achieve measurement of thehighest accuracy by compensating
the tilting error of WLI optical head.

Enables to adjust the focusing position of WLI interference objective lens with theposition where interference fringes occur.
It is used in combination with the calibration chart.

Interference adjustment jig

Other optional software programs for Quick Vision are also available.
For detailed information, refer to the Quick Vision Pro series catalog.

Calibration chart

Abundant Data Manipulation and Analysis Functions
This function handles leveling, outlier processing, formelimination , bearing
area curve, peak distribution, twist analysis, hole/protrusion volume,
texture orientation, and others.

8Calibration chart

QV compensation chart

A calibration chart is used to compensate for the pixel
size of the camera imaging chip and for the auto focus
accuracy and optical axis offset at each magnification of
the variable magnification unit (PPT).

This glass chart is used to perform compensation for distortions
within the screen caused by the optical system, and auto focus
compensation, which reduces auto focus variations that are causedby differences between the workpiece pattern and texture.

Note: There are limitations on the function, depending on the lens.
For details, contact your Mitutoyo sales office.

Note: There are limitations on the function, depending on the lens.
For details, contact your Mitutoyo sales office.

9LINE-UP

Dimensions

unit: mmQVWLI HYPER 404 Pro

414

1781

1381

1200

1781

1381
400

700

1200

414

24-M6 depth12400

(7)

92

2542
50

86 50

86

50

(60)
(13)
(30)
(60)
(13)
(30)

(60)
(13)
(30)

16~17(Distance between the jig fixing
surface and the glass surface)
16~17(Distance between the jig fixing
surface and the glass surface)

(60)
(13)
(30)

1200

700
1794
222
1572

290

70

290

680
1400

70

79.5

392.5

1075
1994

392.5

54.5

392.5

1075
1994

392.5

54.5

2815
700

12-M6 depth10

290
(7.5)

70
(Jig mounting holes)
12-M6 depth12680
79 1400
50

201

290

70
50
201
2815

50 79

79.5

(7.5)

(26)

(Jig mounting holes)

12-M6 depth10(Jig mounting holes)(7.5)

50 121.5(26)

12-M6 depth12

79 50

201

50

201

50 79

(7.5)

(52)

ColumnColumnColumnColumn50131.5 501655017516550175
50 121.5(Jig mounting holes)

131.526*1 L: arbitrary measuring length (unit: mm) *2 Determined by Mitutoyo's inspection method. *3 An excessively biased or concentrated load is excluded.
*4 Programmable power turret 1x, 2x, 4x, 6x model is available by special order. Digital magnification function allows 8x and 12x in addition to 1x, 2x, 4x, 6x. 6 steps of magnification are available in total.
*5 The value in parenthesis is for digital magnification change. *6 Air supply pressure to be in range 0.45 to 0.7 MPa.

(62.5)(13.5)(32.5)(62.5)(13.5)(32.5)

10

315(WLImeasuring range)
400(Vision measuring range)
494(Filling dimension of stage glass)
520
315(WLImeasuring
580(Dimensionbetweenrange)columns)
400(Vision measuring range)
494(Filling dimension of stage glass)520
580(Dimension between columns)

26(0.8 + 2L / 1000)(1.4 + 3L / 1000)(1.5 + 2L / 1000)(1.5 + 3L / 1000)(2.0 + 4L / 1000)
2.5x objective (QV-HR2.5x or QV-SL2.5x) and middle magnification tube lens
2σ≤0.08
0.01
20±1 °C
0.5 °C/1H and 1 °C/24H
70 dB or less
2535
B&W CMOS digital camera
CCD camera
Programmable power turret 1x, 2x, 6x, (12x)*5
White LEDWhite LED
HalogenWhite LED
0.4 MPa*6

123.5

1200

635

697×758
2275

ø60

222

493×551
1205

1075
1426(52)

1400×1994×1794

123.5

33.5

1118×1426×1781

ø60

Column515(WLImeasuring range)
601.5(Vision measuring range)
698(Filling dimension of stage glass)
725
515(WLImeasuring
790(Dimensionbetweenrange)
columns)601.5(Vision measuring range)
698(Filling dimension of stage glass)
725
790(Dimension between columns)(61)(13.5)(32.5)(61)(13.5)(32.5)

7 33.5515×650×220

Column39

315×400×240

2542

ø60

227.5

(39)

600×650×220(7)650(Vision/WLI measuring range)
39854
(39)
650(Vision/WLI measuring range)
854
7 33.5
728
33.5
728

400×400×240

92

1896

QVWLI HYPER 606 Pro
QVW-H606P1L-E

50

635

QVWLI HYPER 404 Pro
QVW-H404P1L-E

145.586
86 50

Column1794
1572

QVWLI HYPER 606 Pro
Model name
Model code
Main unitMeasuring range (X×Y×Z) [mm]Measuring range common to vision and WLI(X×Y×Z) [mm]External dimensions (W×D×H)(Including vibration isolator) [mm]Stage glass (W×D) [mm]Main unit mass (Including vibration isolator) [kg]EUX / EUY, MPE
VisionEUXY, MPE
EUZ, MPE
Vision measuring accuracy[µm]*1
E1X, E1Y
STREAM*2(optional)
E2XY
Optical magnification
WLI repeatability [µm]*2
Resolution of scale [µm]Ambient temperature
Accuracy guaranteed
Temperature variation
environment
Acoustic condition
Maximum stage loading [kg]*3Image capruting Vision
deviceObservation unit
WLI
Power turret*4
Stage light
Vertical coaxial light (Vision)
Illumination unit
Vertical coaxial light (WLI)
PRL
Air supply
Pressureø60
50Column(12)

Specifications(7)827 921118

51 400(Vision/WLI measuring range) 101measuring range)
51 400(Vision/WLI
101
18552(Fillingdimensionof stage glass)(18)552(Filling dimension of stage glass)
588
588(12) 96 50 86 50 86
50 86 50 86 50 146(Jig mounting holes)

QVWLI HYPER 606 Pro

1075
1426

(7)

92(12)

ø6050 146
(12)

24-M6 depth12145.5

QVWLI HYPER 404 Pro

ø60

227.5

145.5

(18)

(Jig mounting holes)

ø60

827
1118

700

ø60

145.5

16~17
(Distance between the jig fixing
surface and the glass surface)18~935 16~17(Distance between the jig fixing
surface and the glass surface)18~93511

2402(JP8), Printed in Japan

Coordinate Measuring Machines

Vision Measuring Systems

Form Measurement

Optical Measuring

Whatever your challenges are, Mitutoyo
supports you from start to finish.
Mitutoyo is not only a manufacturer of top quality
measuring products but one that also offers qualified
support for the lifetime of the equipment, backed up
by comprehensive services that ensure your staff canmake the very best use of the investment.
Sensor Systems

Test Equipment

Digital Scale and DRO Systems

Small Tool Instruments
and Data Management

Apart from the basics of calibration and repair,
Mitutoyo offers product and metrology training,as well as IT support for the sophisticated software
used in modern measuring technology. We can also
design, build, test and deliver measuring solutions
and even, if deemed cost-effective, take your criticalmeasurement challenges in-house on a sub-contractbasis.

Find additional product literatureand our product catalogue
https://www.mitutoyo.co.jp/global.html
Mitutoyo Corporation
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Takatsu-ku, Kawasaki-shi,
Kanagawa 213-8533, Japan

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MITUTOYO and MiCAT are either registered trademarks or trademarks of Mitutoyo Corp. in Japan and/or other countries/regions.
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All product information contained in this brochure is current as of February 2024.

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