MiSCAN Vision System

Catalog No. E14024(3)Vision Measuring Systems

Vision Measuring Machine with Micro-Form Scanning ProbeMeasuring machine well suited to micro-form measurement
Ideal hybrid measuring machine with vision head and scanning probe (MPP-NANO, SP25M).
The image head enables precise positioning and targeting measurement even in shrouded locations wherevisual checking is difficult.

Precise positioning by monitoring
the imageMeasurement using MPP-NANOstylus

For the MPP-NANO stylus, an observation unit is available as an option. Even when using the extra small
0.125-mm-diameter stylus, checking on the monitor enables a safe approach to the measuring point.

Highly accurate autonomous scanning covering from micro-form to large workpieces
Newly developed MPP-NANO probe on which styli as small as 125 µm diameter can be mounted achieves autonomous scanning of fine detail.
Using the observation camera, the approach to the workpiece can be easily performed while also checking for dirt and scratches on theworkpiece. The highly proven SP25M scanning probe is also supported so the system can also be used for large workpieces as well as small.

A magnetic kinematic joint connection enables easy stylus replacement.
Stylus replacement tools, which are in the MPP-NANO stylus tool kit, are supplied as standard.

Vision measurement functions provide high level performance
Uses the same image head as the Quick Vision series, the best-selling vision measuring system.
Also equipped with the same optical system as the Quick Vision, multiple lighting functions and excellent
evaluation software to provide high performance.

MPP-NANO stylus
Scan to view video

Vision Measuring Machine with Micro-Form Scanning Probe

MiSCAN Vision System23

In recent years, the need for fine-detail processing technology has been increasing rapidly, including thesensing technology essential for vehicle motorization and autonomous driving. Simultaneously, enabling highaccuracy, high-throughput measurement of microscopic form is required. Mitutoyo responded quickly to theseneeds, and started selling the Micro Form Measuring System UMAP Vision System some time ago. According
to the current need for improving productivity, we have developed the MiSCAN Vision System, a measuringsystem capable of measuring micro form with the MPP-NANO, a small diameter scanning probe.

Examples of micro-form measurement achieved with the MiSCAN Vision System and MPP-NANO
Microscopic gear teeth

Precision mechanical parts

Conventionally, highly efficient scanning of microscopic gear teeth whose module is one or lower has been difficult. However, using theMiSCAN Vision System together with the MPP-NANO enables this scanning. Simply enter each nominal using GEARPAK, which is thegear teeth evaluation software, to easily evaluate the tooth profile error and tooth trace error.

Module 0.8 master gear measurement

Measurement using the MPP-NANO0.125-mm-diameter stylus

GEARPAK-Cylindrical analysis

Lenses and optical tubes

Aspheric-form MPP-NANO measurement

SCANPAK form analysis example

The MiSCAN Vision System and MPP-NANO enable scanning measurement of microscopic feature detail, such as precision punches anddies, using extra-small-diameter styli, which are available with diameters as small as 0.125 mm.

4FORMTRACEPAK-AP form analysis example

Conventionally, only destructive measurement was possible for the inner diameter of nozzles and draw dies. However, the MiSCAN Vision
System and MPP-NANO now enable performing scanning measurement using the stylus on holes with a maximum aspect ratio of 17:1.

Maximum aspect ratio: 17:1 (for R500-125-85)

MPP-NANO micro-hole measurement

FORMTRACEPAK-AP analysis results

Fine detail contour analysis

Precision molds

MPP-NANO mold scanning

Image seen using the stylus observation
camera unit

Precision mechanical parts (linear guide)

Micro-hole measurement

The MiSCAN Vision System and MPP-NANO enables high-accuracy, highly efficient measurement of miniaturizing and evolving opticaltubes. The MPP-NANO can measure the contour of high degree aspheric lenses used in the vehicle-mounted camera with high accuracy.

Optical tube

The MiSCAN Vision System and MPP-NANO enable highly efficient, high-accuracy measurement of miniature mechanical parts
that improve precision in industrial machinery.

Image seen using the stylus observation
camera unit

SCANPAK form-analysis example

Optional CAT1000S (optional) software enables nominal scanning measurement and form evaluation of micro V-grooves and rectangulargrooves.

Micro V-groove

Creating nominal sections from CAD data(CAT1000S)SCANPAK design value verification

5MPP-NANO For MVS-H302
The world's most compact and accurate scanning probe• Styli as small as a 0.125 mm-diameter are available for scanning measurement of fine-detailedfeatures.
• Deep grooves and deep holes can be measured at the maximum aspect ratio of 17:1
(ø500L8.5).
• High accuracy form measurement is enabled by achieving high repeatability:≤ 0.05 µm (MVS-H302).
• The measuring force is as low as approximately 1 mN. Therefore, it will not scratch or deformthe workpiece.
• The stylus can easily be replaced thanks to the magnetic joint connection.
• The stylus observation unit (optional) enables easy positioning of the stylus tip.
Specifications

Sph.Scan:PP:Tact,MPL

MPP-NANO
Probing accuracy[µm]SP25M
PForm.Sph.1×25:SS:Tact,MPE
Repetitive accuracy [µm] MPP-NANO
Accuracy guaranteed Ambient temperaturetemperature
Temperature variation
Size of stage glass
Max. mass of workpiece*2
Dimensions
Mass (Including machine stand)*1 Image accuracy using a QV-HR 2.5X objective and 2X tube lens.
*2 Except at limits of stage displacement or concentrated loading.
Note1: Accuracy-guaranteed machines conforming to ISO10360-7:2011 are also supported.
Note2: CNC Vision Measuring Systems in this brochure incorporate a main startup system (relocation detection system) that disables operation when an unexpected vibration occurs
or the machine is relocated. Be sure to contact your nearest Mitutoyo Sales Office prior to relocating your machine after initial installation.

6MPP-NANOstylus, ø500L4.5

MPP-NANO
stylus, ø500L8.5

Model
Nominal tip diameter
Nominal stylus length
Stem diameter
Aspect ratioTip material

R125-85-20
125 µm2 mm0.08 mm
16RubyR300-85-40300 µm4 mm
0.08 mm
13.3
Ruby

R500-85-45
500 µm
4.5 mm0.2 mm
9Ruby

R500-125-85
500 µm
8.5 mm
0.3 mm17Rubyø0.125

ø0.3

40.3

8.5
12.5

402ATX722
R500-125-85

8.5

0.3

4.5

0.08

0.6
0.2

02ATX721
R500-85-45

8.5

0.602ATX719
R300-85-40

4.502ATX718
R125-85-20

4ImageMPP-NANO/SP25M
Minimum reading/Scale unit
Image sensor
Observation unit
Illumination unit
Contact type probe
E1X, E1Y
Image*1
E1Z
Measurement
accuracy
E2XY[µm]
MPP-NANO E0MPE
SP25ME0MPEMPP-NANO
Scanning accuracy
PForm.Sph.Scan:PP:Tact,MPE
[µm]
SP25M
Measuring range

Hyper MVS 302
Hyper MVS 404
MVS Apex 404
MVS-H302P1L-D
MVS-H404P1L-D
MVS-X404P1L-D
300x200x200 mm
400x400x250 mm
175x200x200 mm
275x400x250 mm
0.02 µm/Linear encoder
0.1 µm/Linear encoder
B&W CCD camera
Power turret (1X-2X-6X)
Co-axial light, transmitted light, PRL (programmable ring light)
MPP-NANO/SP25M
Only SP25M
0.8+2L/1000
1.5+3L/1000
1.5+2L/1000
1.5+4L/1000
1.4+3L/1000
2.0+4L/1000
1.9+4 L/1000—1.9+4L/1000
2.5+6L/1000
0.6—
2.52.750 s0.6—
1.9
2.20.05—
18 - 23 ºC
0.5 °C/1 H and 1 °C/24 H
399x271 mm
493x551 mm
15 kg
30 kg
40 kg
859x951x1609 mm
1407x1027x1778 mm
360 kg579 kgMPP-NANOstylus, ø300L4

6.5
8.5

Model
Model No.

MPP-NANO
stylus, ø125L22Specifications

Item nameø0.5
ø0.5SP25MCompact, high accuracy scanning probe• The highly proven SP25 scanning probe used with 3D measuring machines can be mounted.
• Stylus changer FCR25 (optional) handles multiple styli, including one in the horizontal
position, and enables automatic stylus changes.
• Captures the target point in high-accuracy point measurement and centripetal aligning point
measurement (optional).

7

Non-contact measurement(vision measurement)

Contact measurement/
Scanning measurement

The MiSCAN Vision System is equipped with an opticalobservation system and an illumination unit of the QUICKVISION measuring system.
It can perform as a high-level vision measuring system.

The MiSCAN Vision System uses the main unit
controller and software that have long been used in
3D measurement and provides high-level coordinate
measurement technology.

VISIONPAK-PRO (required option)

MCOSMOS (required option)
MCOSMOS has long been used in 3D measurement; in addition to size measurement, it offers very
powerful geometric tolerancing functions such as linear contour and plane contour evaluations.

High-level vision measurement functions are equipped, including a one-click tool that enables easy edge detection; adual-area contrast tool that automatically recognizes optimal illumination; and filters (morphology filter) that enablehighly accurate edge detection.

One-click arc toolDual-area contrast toolHigh-accuracy vision measurement

Morphology filter

High-accuracy edge detection is performed using the image obtainedby the image sensor.

MCOSMOS

Programmable power turret

SCANPAK (required option)

The observation unit uses a high-resolution
programmable power turret with highmagnification repeatability.

Image auto focus

Using contour data obtained by the MiSCAN Vision System, nominal verification,
best-fit contour construction and more are available in addition to element calculation.

MCOSMOS flatness drawing

CAT1000S (optional)
Using 3D CAD data, section extraction in the nominal scanning or linear and planecontour evaluations are available.

The auto focus enables non-contact high-accuracy
height measurement. Pattern focus enabling
focusing on transparent and mirror objects is alsoequipped.

1X

2X

FORMTRACEPAK-AP (optional)
6X

Using data obtained by the MiSCAN Vision System enables highly sophisticated analysis including nominal verification, over-pin diameter measurement and arbitrary depthmeasurement.

Programmable ring illuminator
A high-function programmable ring illuminator that has the ability to control the irradiation angle and direction isequipped as standard.
Co-axial reflected illumination

Programmable ring illuminatiion
Stage glass
Transmitted illumination

89Main options

Traceability

Objective lensTraceability to the national standard of length
44 67

44 67

211

86.5

86.5

101

101

211

86.5

85 44

101
86.5

47

339

186.5
400
127
51

1777.5

680

47

47

339

755
1407

2700
86 44

145

47

400

145

Contact probe measuring range

127
86.5

32 55

125

225

47

Stage size: MVS-X404 Contact probe (SP-25M)

Mitutoyo Europe GmbH

Mitutoyo（UK）L.td.

Mitutoyo France S.A.R.L

Mitutoyo America
Corporation Head Office

Mitutoyo Italiana S.R.L.

Mitutoyo Asia Pacific Pte.
Ltd. Regional Headquarters

MITUTOYO SUL AMERICANA
Ltda.

127

32 55

200

10322
400

186.5

4750

113

Contact probe (MPP-NANO/SP-25M)

225
300 47127200

Image measuring range
50
125 83.5 57.5 34322
125
4750400

125

47113

Common measuring range of image and contact probe50■ Sales
■ R&D

186.5

186.5

113

400

86 44

32 55

200
Stage size: MVS-H302

Headquarters

83.5 57.5 34 50

225300275

47MVS-X404/MVS-X302

145

Following the establishment of MTI Corporation (U.S.) in 1963, Mitutoyo has been expanding its market throughout
the world. Currently, the company has R&D, manufacturing, sales, and engineering service bases in 29 countries, aswell as a network of distributors in some 80 countries. Mitutoyo maintains its rock-solid status as a leading global
manufacturer providing services tailored to each regional society.

86.5

83.5 57.5 34 50

12547

86.5

86 4450

125

550
1027

MVS-H302

186.5
400
275

47

200

50

662
951

2500

The world’s top-level global network

1200

400

550
859

175300(JCSS Accredited Cal.Lab. No.0031)
633nm Stabilized He-Ne Laser

Reliable support system5110151

125

804680125(JCSS Accredited Cal. Lab. No.0067)
633nm Iodine Stabilized He-Ne Laser

Mitutoyo Utsunomiya Calibration Center

127

145

86.5

275
50

85 44

36113
32 55
361609800.5

50Mitutoyo Metrological Standards
Calibration Section

Vision Measuring Machine

322

186.5
400

200

32 55
3636

External
dimensions
and measuring ranges
50501200(JCSS Accredited Cal. Lab. No.0067)
Frequency Standard Oscillator(As a standard optical frequency comb)

145

86.5

101

172

127

36

113

200

32 55

113

36

・For FCR25 SP25M
・Master ball (ø16)
・Calibration gauge
83.5 57.5 34 125 125 175300
50 47

175300125

Mitutoyo Metrological Standards
Calibration Section

MitutoyoStandard Scale

83.5 57.5 34

・Stylus observation camera unit for MPP-NANO
・Master ball (ø4)
・Calibration gauge

The atomic clock synchronized to UTC

186.5
400

145

225

83.5 57.5 34• Mitutoyo owns standard scales that are traceable to the national standard oflength and these are used to calibrate the reference gages used for calibrationof measuring instruments, thus establishing and maintaining traceability foreach instrument.
• Our calibration organizations are accredited by IAJapan, a signatory to the Mutual
Recognition Arrangement (MRA) of the International Laboratory Accreditation
Cooperation (ILAC), and approved of as having the measurement skills equivalent
to those of overseas organizations.

51101

127

186.5
400

186.5400
51127

85 4451

36 60.5 55 84.5 36
175

127

36 60.5 55 84.5 36

36 60.5 55 84.5 36

Objective lens
QV-SL0.5X*1*2 QV-HR1X QV-SL1X QV-HR2.5X
QV-HR5X
QV-5X
QV-HR10X*2 QV-10X*2
QV-25X*2
112 57.5 55.5
112 57.5QV-SL2.5X
55.5Working distance
30.5 mm40.6 mm52.5 mm40.6 mm
60 mm
20.0 mm33.5 mm
20 mm
30.5 mm
13 mm
Turret 1X
12.54×9.4
6.27×4.7
2.49×1.86
1.25×0.94
0.62×0.47
0.25×0.18
6744211PRO model
imaging area Turret 2X
6.27×4.7
3.13×2.3
1.24×0.93
0.62×0.47
0.31×0.23
0.12×0.09[(H) mm × (V) mm] Turret 6X
2.09×1.56
1.04×0.78
0.41×0.31
0.20×0.15
0.10×0.07
0.04×0.03*1 Cannot be used with MPP-NANO because the offset calibration with the probe is not supported.
*2 When using a QV-SL0.5X, QV-HR10X, QV-10X or QV-25X objective, partial functional limitations such as insufficient light intensity may occur depending on the target workpiece.
175225175172225 322172322112 57.5 55.5

National Metrology Institute of Japan /National Institute of Advanced
Industrial Science and Technology

125

322

11

110 2302(3)A-(CH)NE-(JP7), Printed in Japan

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