  ࡊ࡜࠭ࡕ࠾࠶ࠢ᭴ㅧ૕ߦࠃࠆశࠛࡀ࡞ࠡ࡯೑↪ߩല₸ൻጤ㐳 ␭િ‛⾰࡮᧚ᢱ⎇ⓥᯏ᭴㧘⑼ቇᛛⴚᝄ⥝ᯏ᭴ߐ߈߇ߌᒻ⁁ߦᔕߓߡᄙᓀߥ౒㡆⁁ᘒࠍ⊒⃻ߔࠆࡊ࡜࠭ࡕ࠾࠶ࠢ᭴ㅧ૕ߪ㊄ዻ࠽ࡁ᭴ㅧ߆
ࠄ᭴ᚑߐࠇ㧘࠽ࡁࠨࠗ࠭ߢశࠍๆ෼ߒ⥄りߩബ⿠⁁ᘒߦᄌ឵ߔࠆߎߣ߇ߢ߈ࠆ㧚ߎࠇ߹ߢߦ SX-9 ਄ߢߩㆇ↪ߦᦨㆡൻ߅ࠃ߮ MPI ൻࠍታᣉߒߡ߈ߚ㔚⏛ᵄᢔੂⴕ೉ᴺߩࠦ࡯࠼ߪࡊ࡜࠭ࡕ࠾࠶ࠢ᭴ㅧ૕ߩ✢ᒻశቇᔕ╵ࠍ㜞♖ᐲߦ⸘▚ߢ߈ࠆ․㐳ࠍ᦭ߔࠆ߶߆㧘࿕᦭ࡕ࡯࠼ߩ⸃᣿ߦ߽᦭↪ߢ޽ࠆ㧚ᧄⓂߢߪ㧘ല₸⊛ߥశࠛࡀ࡞ࠡ࡯೑↪
ߦ㑐ߔࠆᦨㄭߩ⚿ᨐߣㆇ↪ߦᔅⷐߥ⸘▚࡝࠰࡯ࠬߦߟ޿ߡㅀߴࠆ㧚1. ߪߓ߼ߦ㔚⏛᳇ቇߩ╙৻ේℂߢ޽ࠆࡑࠢࠬ࠙ࠚ࡞ᣇ⒟ᑼࠍ᭽‫ߥޘ‬ኻ⽎ߦኻߒߡᢙ୯⊛ߦ⸃ߊߎߣ߇น⢻ߦߥߞߚߩߪᲧセ⊛ᦨㄭߩߎߣߢ޽ࠆ㧚ᦨ߽㐳޿㑆㧘ᢙ୯⊛ߥ⸘▚ᴺࠍ⏕┙ߢ߈ߥ߆ߞߚኻ⽎ߪ㧘࿁᛬ᩰሶߩࠃ߁ߥ㊄ዻࠍ฽߻ࡊ࡜࠭ࡕ࠾࠶ࠢ᭴ㅧ૕ߢ޽ࠆ㧚ߘߩᢙ୯⸘▚ࠕ࡞ࠧ࡝࠭ࡓ߇ 3 ᰴర๟ᦼ᭴ㅧ߹ߢ฽߼ߚᒻߢ৻ㅪߩ⺰ᢥ߇ోߡ⊒⴫ߐࠇߚߩߪ 1997 ᐕߢ޽ࠆ߆ࠄ㨇1,2㨉㧘ᄙߊߩ⺒⠪ߦߣߞߡߪᗧᄖ߆߽ߒࠇߥ޿㧚ࡑࠢࠬ࠙ࠚ࡞ᣇ⒟ᑼ߇⏕┙ߒߚ 1800 ᐕઍߩ⚳ࠊࠅ㨇3㨉߆ࠄ⚂ 1਎♿ࠍ⚻ߡ㧘ࠃ߁߿ߊ⸘▚ᴺ߇㐿⊒ߐࠇߚߎߣߦߥࠆ㧚㊄ዻࠍ฽߻๟ᦼ᭴ㅧ૕ߦኻߔࠆࡑࠢࠬ࠙ࠚ ࡞ ᣇ⒟ ᑼࠍ ⸃ ߊߚ ߼ߦ ߪ ࡈ࡯ ࡝ࠛ ⚖ ᢙዷ 㐿 ߒ ߚ ᣇ ⒟ ᑼ ࠍ ⸃ ߊߎ ߣߦ ߥ ࠅ 㧘 ⃻ ࿷ RCWA
㧔Rigorously Coupled Wave Approximation㧕ᴺߩฬ೨ߢᲧセ⊛ࠃߊ⍮ࠄࠇߡ޿ࠆ㧚ࡈ࡯࡝ࠛᄌ឵ߒ
ߚᣇ⒟ᑼࠍ᦭㒢ᰴߢಾᢿߒߡ⸘▚ߔࠆߎߣߪᐢߊⴕࠊࠇߡ޿ࠆߚ߼ኈᤃߦታⴕߢ߈ߘ߁ߦᕁࠊࠇࠆ߇㧘ࡊ࡜࠭ࡕ࠾࠶ࠢ᭴ㅧ૕ߦኻߔࠆࡈ࡯࡝ࠛ⚖ᢙዷ㐿ߐࠇߚࡑࠢࠬ࠙ࠚ࡞ᣇ⒟ᑼࠍන⚐ߦಾᢿߒߚ႐ว㧘⸘▚⚿ᨐ߇⃻ታ⊛ߥಾᢿᰴᢙߢߪ෼᧤ߒߥ޿㧚ߘߩߚ߼㧘1997 ᐕ߹ߢߩ⚂ 30 ᐕ㑆ߦࠊߚߞߡᢙ୯⸘▚ߩ㔍໧ߣߒߡᄙߊߩ⎇ⓥ⠪ߩ᜸ᚢࠍㅌߌߡ߈ߚߩߢ޽ࠆ㧚ࡊ࡜࠭ࡕ࠾࠶ࠢ᭴ㅧ૕ߩ․⦡ߪ࠽ࡁࠨࠗ࠭ߩᭂᓸዊ᭴ㅧߦࠃߞߡ㧘శࠛࡀ࡞ࠡ࡯ࠍ㕖Ᏹߦല₸⦟ߊๆ෼ߒߡࡊ࡜࠭ࡕ࠾࠶ࠢ౒㡆ߩബ⿠ߦ૶߁ߎߣ߇ߢ߈ࠆὐߦ޽ࠆ㧚࿑ 1 ߪࡊ࡜࠭ࡕ࠾࠶ࠢ᭴
ㅧ૕㧔㊄⦡ߣ᳓⦡ߩࠨࡦ࠼ࠗ࠶࠴᭴ㅧ㧕ߩ৻଀ߣశߩᵄ㐳ߩᄢዊ㑐ଥࠍᮨᑼ⊛ߦឬ޿ߡ޿ࠆ㧚㊄⦡߇㊄ዻ㧘᳓⦡߇⛘✼૕ࠍ⴫ߒߡ޿ࠆ㧚⿒✢ߢ 1 ๟ᦼࠍ⴫ߒߚశߩᵄ㐳ߪ᭴ㅧ๟ᦼ㐳 a ߿ෘߐ dࠃࠅ߽㐳޿㧚࿑㧝 ࡊ࡜࠭ࡕ࠾࠶ࠢ᭴ㅧ૕ߣ౉኿ᵄ㐳ߩᄢዊ㑐ଥ㧚  

࿑ 1 ߢ଀␜ߒߚࡊ࡜࠭ࡕ࠾࠶ࠢ᭴ㅧ૕ߪᮮᣇะߦ๟ᦼ⊛ߢ㧘⚕㕙ߦု⋥ߥᣇะߦή㒢ߦ㐳޿ 1ᰴర๟ᦼ⊛ߥ᭴ㅧࠍᮨߒߡ߅ࠅ㧘ߎߩࠃ߁ߥ࠽ࡁ᭴ㅧ૕ߪㅢ଀ၮ᧼਄ߦ૞⵾ߔࠆ㧚๟ᦼ㐳 a ߪశߩᵄ㐳ߣห⒟ᐲ߆ߘࠇࠃࠅ⍴޿႐ว߇ᄙߊ㧘ෘߐ d ߦ㑐ߒߡߪశߩᵄ㐳ߩ 1/10 ⒟ᐲߢ޽ࠆߎߣ߇
ᄙ޿㧚ߒߚ߇ߞߡ⭯޿᭴ㅧߢ޽ࠆ߇㧘ᾖ኿ߐࠇࠆశࠛࡀ࡞ࠡ࡯ߩᢙච%߆ࠄ⊖%ࠍߎߩ࠽ࡁ᭴ㅧ૕ߢๆ෼ߒ㧘ዪᚲ⊛ߥჇᒝ㔚⏛႐ߦᄌ឵ߔࠆߎߣ߇ߢ߈ࠆ㧚Ⴧᒝലᨐߪ㊄ዻౝㇱߩવዉ㔚ሶߩ㓸࿅⊛ߥബᝄ⁁ᘒߢ޽ࠆࡊ࡜࠭ࡕ࠾࠶ࠢ౒㡆ߦࠃߞߡ⊒⃻ߔࠆ㧚శࠛࡀ࡞ࠡ࡯ࠍ․ቯߩ૏⟎ㄭறߢ૶߁ߎߣࠍน⢻ߦߔࠆߎߣ߆ࠄ㧘࡜ࡑࡦᢔੂߥߤߩశᢔੂჇᒝ㧘శ㔚ᄌ឵⚛ሶߩᄌ឵ല₸ะ਄ߥߤ᭽‫ߥޘ‬ᔕ↪߇ᦼᓙߐࠇߡ޿ࠆ㧚๟ᦼ♽ߦ㒢ቯߒߥ޿ࡊ࡜࠭ࡕ࠾࠶ࠢ᭴ㅧ૕ࠍ↪޿ߚ⎇ⓥಽ㊁ߪࡊ࡜࠭ࡕ࠾ࠢࠬߣ๭߫ࠇߡ㧘⃻࿷਎⇇ਛߢ♖ജ⊛ߦ⎇ⓥ߇ⴕࠊࠇߡ޿ࠆ㧚ᧄⓂߢߪᦨㄭߩࡊ࡜࠭ࡕ࠾࠶ࠢ᭴ㅧ૕ߩ⚿ᨐ߆ࠄశࠛࡀ࡞ࠡ࡯೑↪ߦㆡߒߚౕ૕⊛ߥ᭴ㅧࠍ޿ߊߟ߆⚫੺ߒ㧔╙ 2 ▵㧕㧘ᢙ୯⸘▚ࠍታᣉߔࠆ㓙ߩታⴕኈ㊂ߦߟ޿ߡㅀߴࠆ㧔╙ 3 ▵㧕㧚㧚ࡊ࡜࠭ࡕ࠾࠶ࠢ᭴ㅧ૕ߦ߅ߌࠆశࠛࡀ࡞ࠡ࡯ߩ೑↪ല₸
2㧚㧚ࡊ࡜࠭ࡕ࠾࠶ࠢ᭴ㅧ૕ߦ߅ߌࠆశࠛࡀ࡞ࠡ࡯ߩ೑↪ല₸ࡊ࡜࠭ࡕ࠾࠶ࠢ᭴ㅧ૕ߩ෻኿₸߿ㅘㆊ₸ࠍ⸘▚ߔࠆࠕ࡞ࠧ࡝࠭ࡓ߿ࠦ࡯࠼⥄૕ߦߟ޿ߡߪᧄ⹹਄ߢߚ߮ߚ߮ႎ๔ߒߡ߈ߚ㨇4–9㨉ߩߢ➅ࠅ㄰ߔߎߣߪㆱߌࠆ߇㧘ࡈ࡯࡝ࠛ⚖ᢙߩଥᢙⴕ೉ߦㅒⓍ࡞࡯࡞ࠍㆡ↪ߔࠆߎߣߦࠃࠅ⃻ታ⊛ߥᤨ㑆ౝߢ⸘▚ࠍታⴕߢ߈ࠆ㨇7㨉㧚⸘▚ࠦ࡯࠼ߩ SX-9 ਄ߢߩᦨㆡൻߦ㑐ߒߡ㧘ࡌࠢ࠻࡞ൻ₸ߪᣧ޿Ბ㓏߆ࠄ 99% એ਄ߢ޽ߞߚ㧚MPI ൻߦࠃࠆਗ೉ൻ₸ߩะ਄ߦߟ޿ߡߪᤓᐕᧄ⹹਄ߢㅀߴߚࠃ߁ߦᚲᦸߩᚑᨐ߇ᓧࠄࠇߡ޿ࠆ㨇9㨉㧚
࿑ 2(a) ߪ㊄ዻ㧔M㧕㧘⛘✼૕㧔I㧕߇ࠨࡦ࠼ࠗ࠶࠴⁁ߦⓍጀߒߚ MIM ᭴ㅧߦⓨ᳇ࠬ࡝࠶࠻߇౉
ߞߚ᭴ㅧࠍ␜ߒߡ޿ࠆ㧚๟ᦼߪ 830 nm㧘ⓨ᳇ࠬ࡝࠶࠻ߩ᏷ߪ 200 nm ߢ޽ࠆ㧚㊄ዻߪ㊄㧔Au㧕㧘⛘✼૕ߪࠕ࡞ࡒ࠽㧔Al2O3㧕ߣߒߡᢥ₂୯㨇10㨉ߩ⺃㔚₸ࠍ↪޿ߡ㔚⏛ᵄᢔੂⴕ೉ࠍᢙ୯⸘▚ߒߚ㧚࿑㧞 (a) 1 ᰴర๟ᦼߩⓨ᳇ࠬ࡝࠶࠻⽾ㅢဳߩ MIM ዉᵄ〝᭴ㅧ㧚ၮ᧼ߩ࿑␜ߪ⋭⇛ߒߡ޽ࠆ㧚(b)౉኿శⷺᐲߦଐሽߒߚๆ෼ࠬࡍࠢ࠻࡞㧚࿑ 2(b) ߪࡊ࡜࠭ࡕ࠾࠶ࠢ᭴ㅧ૕ߩశๆ෼ࠬࡍࠢ࠻࡞ࠍ␜ߒߡ޿ࠆ㧚౉኿ᐔ㕙ᵄߩⷺᐲ T ࠍ 0ᐲ߆ࠄ 30 ᐲ߹ߢ 5 ᐲ߅߈ߦᄌ߃ߡ▚಴ߒߚ߽ߩߢ޽ࠅ㧘஍శߪ࿑ 2(a) ߦ␜ߔࠃ߁ߦ p ஍శߢ޽ࠆ㧚శๆ෼ A ߪA 100  ¦¦mm,,nn ( Rmnmn  Tmnmn )              (1)ߦࠃߞߡቯ⟵ߐࠇࠆ㧔න૏ߪ%㧕㧚ߚߛߒ㧘m㧘n ߪᢛᢙߢ Rmn ߪ mn ᰴߩ෻኿₸㧘Tmn ߪ mn ᰴߩ 
 !"#$%&'()*+,-./
ㅘㆊ₸ࠍ⴫ߒߡ޿ࠆ㧚00 ᰴߪㅢᏱߩ෻኿₸㧘ㅘㆊ₸㧘00 ᰴએᄖߪ࿁᛬శᚑಽߦኻᔕߔࠆ㧚㔚⏛ᵄ
ᢔੂⴕ೉ᴺ߇⋥ធ▚಴ߔࠆߩߪᢔੂ㔚⏛ᵄᚑಽߩ Rmn㧘Tmn ߢ޽ࠆ㧚ࠛࡀ࡞ࠡ࡯ᦨૐᰴߩࡇ࡯ࠢ
㧔0.42 eV㧘ᵄ㐳ߢ 2951 nm㧕ߪ߶ߣࠎߤ౉኿ⷺᐲߦଐሽߒߥ޿߇㧘2 ᰴߩࡇ࡯ࠢ㧔0.82 eV㧘1511 nm㧕ߪⷺᐲ߇ᄢ߈ߊߥࠆߦߒߚ߇ߞߡๆ෼㊂ࠍჇߒߡ޿ߊ․ᓽ߇޽ࠆ㧚ߣߊߦ౉኿ⷺᐲ 0 ᐲߢ 2 ᰴ౒㡆ࠍోߊബ⿠߇ߢ߈ߥ޿ߎߣ߆ࠄ㔚⏛႐ಽᏓ߇㕖ኻ⒓ߥࡕ࡯࠼ߢ޽ࠆߎߣ߇ಽ߆ࠆ㧚0 ᐲ౉኿శߪኻ⒓ߥ㔚⏛႐ࠍ߽ߟߎߣ߆ࠄ㧘ኻ⒓ᕈߩਇ৻⥌ߢബ⿠ߢ߈ߥ޿ߩߢ޽ࠆ㧚࿑ 3 ߪⓨ᳇ࠬ࡝࠶࠻⽾ㅢဳߩ MIM ዉᵄ〝᭴ㅧߦ߅ߌࠆᦨૐᰴࡕ࡯࠼ߩ㔚⏛႐ಽᏓࠍนⷞൻߒߚ⚿ᨐߢ޽ࠆ㧚࿑ 3(a) ߪ㔚႐ಽᏓࠍ␜ߒߡ߅ࠅ㧘ࠞ࡜࡯ࡊࡠ࠶࠻ߪ㔚႐ᒝᐲ㧔⛘ኻ୯㧕㧘⿒⍫ශߪ㔚႐ࡌࠢ࠻࡞ߩࠬ࠽࠶ࡊ࡚ࠪ࠶࠻ࠍ␜ߒߡ޿ࠆ㧚ਥߦჇᒝߐࠇߡ޿ࠆߩߪ㊄ዻߦ᜽߹ࠇߚⓨ᳇ࠬ࡝࠶࠻ㇱಽߢ޽ࠅ㧘⛘✼૕ጀߦ߽㔚႐ಽᏓ߇ሽ࿷ߒߡ޿ࠆߎߣ߇ಽ߆ࠆ㧚⊕⍫ශߢ␜ߔࠃ߁ߦ
౉኿శߪ 0 ᐲ౉኿㧔ု⋥౉኿㧕ߢ޽ࠆ߇㧘⛘✼૕ጀౝߩ㔚႐ࡌࠢ࠻࡞ߪ౉኿㔚႐߇ 90 ᐲ࿁ォߒߚะ߈ߦߥߞߡ޿ࠆ㧚࿑ 3(b) ߪ࿑ 3(a)ߣኻᔕߔࠆ⏛႐ಽᏓࠍ␜ߒߡ޿ࠆ㧚ࠞ࡜࡯ࡊࡠ࠶࠻߇⏛႐ᒝᐲ㧔⛘ኻ୯㧕ࠍ␜ߒߡ޿ࠆ㧚⏛႐ߪ㊄ዻߢ᜽߹ࠇߚ⛘✼૕ጀㇱಽߦዪ࿷ߒ㧘ߥ߅߆ߟჇᒝߐࠇߡ޿ࠆ㧚ߎߩ଀ߢߪ
10 ୚⒟ᐲߩჇᒝലᨐ߇޽ࠆ㧚⏛႐ࡌࠢ࠻࡞ߩะ߈ߪ⚕㕙ߣု⋥ߢ޽ࠆ㧚એ਄ߩࠃ߁ߦ㔚⏛႐ࠛࡀ࡞ࠡ࡯ߪࡊ࡜࠭ࡕ࠾࠶ࠢ᭴ㅧ૕ౝㇱ߅ࠃ߮ㄭறߦᒝߊዪ࿷ߒ㧘߆ߟ౉኿శᒝᐲߣࠞ࡜࡯ࡊࡠ࠶࠻ࠍᲧߴࠆߣჇᒝߐࠇߡ޿ࠆߎߣ߇ಽ߆ࠆ㧚శࠍዪᚲ⊛ߥჇᒝ㔚⏛႐ߦᄌ឵ߒߡ޿ࠆౖဳ⊛ߥಽᏓࠍ࿑ 3 ߪ␜ߒߡ޿ࠆ㧚㜞ᰴߩ౒㡆⁁ᘒߦߟ޿ߡߪ㔚⏛႐ಽᏓ߇ࠃࠅⶄ㔀ߥࡄ࠲࡯ࡦࠍ␜ߔ㧚ߥ߅㧘㔚⏛႐ಽᏓߩนⷞൻߦߪ᦭㒢ⷐ⚛ᴺࠍេ↪ߒߚ㨇11㨉㧚࿑㧟 ⓨ᳇ࠬ࡝࠶࠻⽾ㅢဳߩ MIM ዉᵄ〝᭴ㅧߩᦨૐᰴ౒㡆㧚(a) 㔚႐ᚑಽ㧚(b) ⏛႐ᚑಽ㧚 ࿑ 4(a) ߩࡊ࡜࠭ࡕ࠾࠶ࠢ᭴ㅧ૕ߪ MIM ዉᵄ〝᭴ㅧࠍၮߦߒߡ޿ࠆὐߢ࿑ 2(a) ߩ᭴ㅧߣ౒ㅢߒ
ߡ޿ࠆ߇㧘ᦨ⴫ጀߩߺ߇ 1 ᰴర๟ᦼ⊛ߦߥߞߡ޿ࠆὐ߇⇣ߥࠆ㧚๟ᦼߪ 830 nm㧘ⓨ᳇ࠬ࡝࠶࠻ߪ
200 nm ߢ޽ࠆ㧚㊄ዻጀ㧘⛘✼૕ጀߩෘߐ߽࿑ 2 ߣ౒ㅢߢ޽ࠆ㧚 ࿑ 4(b) ߦߪ౉኿ p ஍శਅߩๆ෼ࠬࡍࠢ࠻࡞ࠍ␜ߒߡ޿ࠆ㧚౉኿ⷺᐲߪ 0 ᐲ߆ࠄ 30 ᐲ߹ߢ 5 ᐲೞߺߢᄌ߃ߡ⸘▚ߒߚ㧚ߎߩ᭴ㅧߢߪశๆ෼㊂߇࿑ 2(b) ߣᲧߴߡჇടߒߡ޿ࠆ㧚ᦨᄢ୯ߢ 90%ࠍ⿥߃ࠆࡕ࡯࠼߽ሽ࿷ߒ㧘శࠛࡀ࡞ࠡ࡯೑↪߇ࠃࠅല₸⊛ߥ᭴ㅧߢ޽ࠆߎߣ߇ಽ߆ࠆ㧚ᦨૐᰴߣ
2 ᰴߩ౒㡆ࡕ࡯࠼ߦߟ޿ߡߪቯᕈ⊛ߥᝄࠆ⥰޿ߪ࿑ 2 ߩⓨ᳇ࠬ࡝࠶࠻⽾ㅢဳߣห᭽ߢ޽ࠅ㧘ᦨૐ
ᰴ߇ኻ⒓ࡕ࡯࠼㧘2 ᰴ߇㕖ኻ⒓ࡕ࡯࠼ߢ޽ࠆ㧚3 ᰴએ਄ߩࡕ࡯࠼ߦ㑐ߒߡ㧘౉኿శⷺᐲଐሽᕈ߇㗼⪺ߢࠬࡍࠢ࠻࡞߇ᄢ߈ߊᄌൻߔࠆߎߣߪ࿁᛬శ࠴ࡖࡦࡀ࡞߇⸵ኈߦߥࠆߎߣߣኻᔕߒߡ޿ࠆ㧚࿁᛬శ߇౉኿ⷺᐲߦଐሽߒߡ⦡߇ᄌࠊࠆߎߣߪ⋡ߢ⷗ߡ⏕⹺ߢ߈ࠆ߇㧘౒㡆ࡕ࡯࠼ߩ౉኿ⷺᐲଐሽᕈࠍ෻ᤋߒߚ⃻⽎ߢ޽ࠆ㧚 ᭴ㅧߦࠃߞߡశๆ෼㊂ߦߎߩࠃ߁ߥ㆑޿߇޽ࠆߎߣߪࡊ࡜࠭ࡕ࠾࠶ࠢ᭴ㅧ૕ߦዪ࿷ߔࠆ㔚⏛႐߇ਥߦ⛘✼૕ጀߦሽ࿷ߔࠆߎߣࠍ␜ໂߒߡ޿ࠆ㧚࿑ 2 ߩⓨ᳇ࠬ࡝࠶࠻⽾ㅢဳߢߪ⛘✼૕ጀ߇๟ᦼ  ⊛ߦಾࠅ㔌ߐࠇߡ޿ߚߚ߼㧘శߩㅏߍ߇⿠ߎࠅ߿ߔߊ㧘⚿ᨐߣߒߡశๆ෼㊂߇ૐ޿ߣ⠨߃ࠄࠇࠆ㧚 એ਄ߩࠃ߁ߦ᭴ㅧ߇ዋߒ⇣ߥࠆߎߣߢశቇᔕ╵߿శๆ෼߇ቯ㊂⊛ߦᄢ߈ߊᄌൻߔࠆߎߣ߇ࡊ࡜࠭ࡕ࠾࠶ࠢ᭴ㅧ૕ߩ㕙⊕ߐߩ৻ߟߢ޽ࠆ㧚ߘࠇߛߌߦ᭴ㅧ⸳⸘ߦߪ♖ᐲ߇᳞߼ࠄࠇ㧘SX-9 ߩࠃ߁ߥࠬ࡯ࡄ࡯ࠦࡦࡇࡘ࡯࠲ߢ⸘▚ࠍታⴕߔࠆߎߣ߇ᔅⷐߣߥߞߡߊࠆ㧚࿑㧠 (a)ᦨ⴫ጀߩߺ߇ 1 ᰴర๟ᦼࠍ߽ߟ MIM ዉᵄ〝᭴ㅧ㧚ၮ᧼ߩ࿑␜ߪ⋭⇛ߒߡ޽ࠆ㧚(b) ౉኿శⷺᐲߦଐሽߒߚๆ෼ࠬࡍࠢ࠻࡞㧚࿑ 5(a) ߪ MIM ዉᵄ〝᭴ㅧߦ 2 ᰴరᱜᣇᩰሶ⁁ߦ๟ᦼ᭴ㅧࠍዉ౉ߒߚࡊ࡜࠭ࡕ࠾࠶ࠢ᭴ㅧ૕ࠍ
ᮨᑼ⊛ߦ␜ߒߡ޿ࠆ㧚㊄ዻጀ㧘⛘✼૕ጀߩෘߐߪ࿑ 2㧘࿑ 4 ߣ౒ㅢߢ޽ࠆ㧚๟ᦼߪ 830 nm㧘౞ሹ⋥ᓘߪ 400 nm ߢ޽ࠆ㧚࿑㧡 (a) 2 ᰴర⊛ߥⓨ᳇౞ሹ㈩೉ࠍዉ౉ߒߚ MIM ዉᵄ〝᭴ㅧ㧚(b) ᦨૐᰴࡕ࡯࠼ࠍബ⿠ߒߚߣ߈
ߩ㔚⏛ࠛࡀ࡞ࠡ࡯ኒᐲᵹ㧚 
 !"#$%&'()*+,-./
࿑ 5(b) ߪᦨૐᰴߩ౒㡆⁁ᘒࠍᢳ߼౉኿ਅߢബ⿠ߒߚߣ߈ߩ㔚⏛ࠛࡀ࡞ࠡ࡯ኒᐲᵹࠍนⷞൻߒߚ߽ߩߢ޽ࠆ㧚ߎߩ႐ว߽࿑ 3 ߣห᭽ߦ⛘✼૕ጀߦ㔚⏛ࠛࡀ࡞ࠡ࡯߇㓸߹ࠅ㧘વ៝ߔࠆ㧚વ៝ߩะ߈ߪ㤥޿ਃⷺ⍫ශߢ␜ߒߡ޿ࠆ㧚ਅߩ᳓ᐔᢿ㕙߆ࠄಽ߆ࠆࠃ߁ߦ౉኿ᐔ㕙ᵄߩ㔚⏛ࠛࡀ࡞ࠡ࡯ߪ㧗x ߩะ߈ߦᾖ኿ߐࠇߡ޿ࠆ߇㧘⛘✼૕ጀౝߢߪ㧙x ߩะ߈ߦᵹࠇߡ޿ࠆ㧚ߟ߹ࠅ㧘౉኿శߣㅒะ߈ߩ㔚⏛ᵄߩᵹࠇ߇ബ⿠ߐࠇߡ޿ࠆ㧚ߎࠇߪ⽶ߩ⟲ㅦᐲࠍ߽ߟᐔ㕙ᵄࡕ࡯࠼ߢ޽ࠆߎߣࠍⷞⷡൻߒߚ⚿ᨐߢ޽ࠆ㧚╩⠪ߪߎߩ․ᓽ⊛ߥ౒㡆ࡕ࡯࠼ࠍᵄᢙߣࠛࡀ࡞ࠡ࡯ߩಽᢔ㑐ଥ߆ࠄ⹦ߒߊ
⸃ᨆߒߚ㨇13,14㨉㧚ಽᢔ㑐ଥߪๆ෼ࠬࡍࠢ࠻࡞ߩ౉኿ⷺᐲଐሽᕈ߆ࠄ᳞߼ࠆߎߣ߇ߢ߈ࠆߩߢ㧘㔚⏛ᵄᢔੂⴕ೉ᴺߩᢙ୯⸘▚߇ᧄ⾰⊛ߥᓎഀࠍᨐߚߒߚᚑᨐߣ⸒߃ࠆ㧚ߥ߅㧘࿑ 5(a) ߩ᭴ㅧ૕ߪࡈࠖ࠶ࠪࡘࡀ࠶࠻࡮ࡔ࠲ࡑ࠹࡝ࠕ࡞㨇12㨉ߣ๭߫ࠇߡ޿ࠆ߽ߩߢ㧘శቇ㗔ၞߢೋ߼ߡ⽶ߩዮ᛬₸ࠍ߽ߟߣߺߥߖࠆ᭴ㅧ૕ߣߒߡᄢ߈ߥᵈ⋡ࠍ㓸߼ߚ㧚ࡊ࡜࠭ࡕ࠾࠶ࠢ
᭴ㅧ૕ߩ๟ᦼ߇శߩᵄ㐳ࠃࠅ߽ 1/2 એਅߦዊߐ޿ߣ߈ߦߪ࿁᛬శ߇↢ߓߥ޿ߎߣ߆ࠄᣂߒ޿ᇦ૕
ߣߒߡࡔ࠲ࡑ࠹࡝ࠕ࡞ߣ๭⒓ߐࠇߡ޿ࠆ㧚

3. SX-9 ਄ߢߩᢙ୯⸘▚ߩታⴕኈ㊂ ߎߩ▵ߢߪ㔚⏛ᵄᢔੂⴕ೉ᴺߩᢙ୯⸘▚ࠍታⴕߔࠆ㓙ߦᔅⷐߣߥߞߚࡔࡕ࡝߿⸘▚ᤨ㑆ߦߟ޿ߡߩㅀߴࠆ㧚 ૶↪ߔࠆࡔࡕ࡝ߪਥߦࡈ࡯࡝ࠛዷ㐿ᰴᢙߣ᭴ㅧ૕ߩන૏⢩ࠍಽഀߔࠆࠣ࡝࠶࠼ᢙߦࠃߞߡ᳿߹
ࠆ㨇7,9㨉
㧚1 ᰴర๟ᦼ♽ߪ⸘▚㊂߇ዋߥߊ㧘࿑ 2 ߿࿑ 4 ߩ႐วߢߪචಽߥ♖ᐲࠍ಴ߔߚ߼ߦr75
ᰴ⒟ᐲߣࠇ߫ࠃ޿㧚ࠣ࡝࠶࠼ᢙ߽ 2 ߣ௖ዋߢ޽ࠆߚ߼㧘ᔅⷐߥࡔࡕ࡝ߪ 0.6 GB ⒟ᐲߢ޽ߞߚ㧚ๆ෼ࠬࡍࠢ࠻࡞ߪ࠺࡯࠲ὐࠍᄙᢙ࿁⸘▚ߒߡᓧߡ߅ࠅ㧘1 ὐ޽ߚࠅߩ⸘▚ᤨ㑆㧔SX-9 ߩ಴ജߢߪ
Real Time㧕ߪ࡚ࠫࡉࠢ࡜ࠬ s ਄ߢ⚂ 3 ⑽ߢ޽ߞߚ㧚1 ᰴర♽ߛߌߢ޽ࠇ߫ࠬ࡯ࡄ࡯ࠦࡦࡇࡘ࡯࠲
ߪᔅⷐߣ޿߁ࠊߌߢߪߥ޿㧚৻ᣇ㧘2 ᰴర♽ߢߪࡔࡕ࡝㊂߇ỗჇߒ㧘࿑ 5 ߩ႐วߢߪࡈ࡯࡝ࠛᰴᢙࠍ xy ᣇะߣ߽ߦr18 ᰴ߹ߢߣߞߚߣ߈ߦߪࡔࡕ࡝ 40 GB ⒟ᐲ㧘࡚ࠫࡉࠢ࡜ࠬ p16 ਄ߢ 548 ⑽㧛ὐߩ⸘▚ᤨ㑆ࠍⷐߒߚ㧚ߎߩߣ߈ߦᛒ߁ⶄ⚛ⴕ೉ߪ 54765476 ߩࠨࠗ࠭ߢ޽ߞߚ㧚หߓ⸘▚ࠍ MPI ൻߒߚࠦ࡯࠼ߢታⴕߔࠆߣ㧘p64 ਄ߢߪ⸘▚ᤨ㑆ߪ߶߷ 1/4 ߦߥࠆ㧔ߚߛߒ㧘ࡔࡕ࡝ߪ⚂ 4 ୚ᔅⷐߦߥࠆ㧕㧚ߒߚ߇ߞߡ㧘2 ᰴర♽߽฽߼ߡ㜞♖ᐲ߆ߟㅦ߿߆ߥᢙ୯⸘▚ߩታⴕߩߚ߼ߦߪ SX-9 ߩࠃ߁ߥࠬ࡯ࡄ࡯ࠦࡦࡇࡘ࡯࠲߇㕖Ᏹߦ᦭ലߢ޽ࠆ㧚 ࠃࠅᄢ߈ߥ⸘▚ࠍታⴕߒߚ⚻㛎߽޽ࠅ㧘ࠣ࡝࠶࠼ᢙ߇ᄢ߈ߥ႐วߪ p16 ਄ߢࡔࡕ࡝ 840 GB ߣ޿߁⸘▚߽޽ߞߚ㧚SX-9 ߢߔࠄࡁ࡯࠼ࡔࡕ࡝ߩ਄㒢ߦㄭ޿㧚ߎߩࠃ߁ߦࡊ࡜࠭ࡕ࠾࠶ࠢ᭴ㅧ૕ࠍ‫ ߪߦޠߊ⸃ޟ‬SX-9 ࠢ࡜ࠬߩ⸘▚࡝࠰࡯ࠬ߇ᔅⷐߢ޽ࠆߣ⹺⼂ߒߡ޿ࠆ㧚 ᦨㄭߢߪਗ೉ࠦࡦࡇࡘ࡯࠲߇ਥᵹߣߥߞߡ߈ߡ޿ࠆ߇㧘㔚⏛ᵄᢔੂⴕ೉ᴺߢߪ৻⥸ⶄ⚛ⴕ೉ߩ࿕᦭୯㧘࿕᦭ࡌࠢ࠻࡞ࠍ᳞߼ࠆᔅⷐ߇޽ࠅ㧘ߎߩ㑐ᢙࠍਗ೉ൻߢ߈ߥ޿ߣਗ೉ࠦࡦࡇࡘ࡯࠲ߩ㐳ᚲࠍ↢߆ߖߥ޿㧔N ਗ೉ߥߩߦ 1 CPU ߛߌⒿ௛ߒߡ (N-1) CPU ߪભࠎߢ޿ࠆߣ޿߁੐ᘒߦ㒱ࠆ㧕㧚ᐘ޿ ASL 㑐ᢙߢߪਗ೉ ࠍ㐿⊒ߒߡ޿ߚߛ޿ߚߩߢ㧘ℂᗐ⊛ߢߪߥ޿߽ߩߩਗ೉ൻ₸ߪ߆ߥࠅ㜞޿㧚ߎߩὐ߽ SX-9 ࠍ૶↪ߔࠆ೑ὐߢ޽ࠆߣ⠨߃ߡ޿ࠆ㧚

4. ߹ߣ߼
ࡊ࡜࠭ࡕ࠾࠶ࠢ᭴ㅧ૕ߩశቇ․ᕈࠍ⸃᣿ߔࠆߚ߼ߦ㔚⏛ᵄᢔੂⴕ೉ᴺࠍ૶ߞߡᢙ୯⸘▚ࠍታⴕߒߚ੐଀ࠍਛᔃߦㅀߴߡ߈ߚ㧚1 ᰴర㧘2 ᰴర♽ߢోߊ⇣ߥࠆ౒㡆ࡕ࡯࠼߇⊒⃻ߔࠆߎߣ㧘1 ᰴర♽ߢ߽න૏⢩ߩ᭴ㅧࠍዋߒ߆߃ࠆߣቯ㊂⊛ߦߪశๆ෼ߦᄢ߈ߥᄌൻ߇↢ߓࠆߎߣߥߤࠍ␜ߒߚ㧚㊄ዻ࠽ࡁ᭴ㅧߩᭂᓸ⚦ߥ᭴ㅧࠍዋߒᄌ߃ࠆߛߌߢశᔕ╵ᕈ߿౒㡆ࡕ࡯࠼߇ᄢ߈ߊᄌࠊࠆߎߣ߇ࡊ࡜࠭ࡕ࠾࠶ࠢ᭴ㅧ૕ߩ㉑㉓๧ߣ⸒߃ࠆ㧚ߘࠇߛߌߦ⸘▚♖ᐲ߿᭴ㅧߩ⹦⚦ࠍ౉ᔨߦᬌ⸛ߔࠆᔅⷐ߇޽ࠅ㧘ᄢ㊂ߩᢙ୯⸘▚߇ᔅⷐߣߥࠆ㧚ࡊ࡜࠭ࡕ࠾࠶ࠢ᭴ㅧ૕ࠍ㔚ሶ⚛ሶߥߤߣ⚵ߺวࠊߖࠆߣߐࠄߦᄢ߈ߥ⸘▚ߣߥࠅ㧘ߘࠇࠄ߇੹ᓟߩኻ⽎ߣߥߞߡ޿ߊߣ⠨߃ߡ޿ࠆ㧚   

⻢ㄉᧄ⎇ⓥߦ߅ߌࠆ⸘▚ࠦ࡯࠼ߩਗ೉ൻ࠴ࡘ࡯࠾ࡦࠣߪ᧲ർᄢቇࠨࠗࡃ࡯ࠨࠗࠛࡦࠬ࠮ࡦ࠲࡯ߩഥ
ജࠍᓧߡⴕ߁ߎߣ߇ߢ߈߹ߒߚ㧚MPI ൻߩታⵝߪ SX-9 㐿⊒ర NEC ߩߏදജࠍᓧߡ㧘᧲ർᄢቇࠨࠗࡃ࡯ࠨࠗࠛࡦࠬ࠮ࡦ࠲࡯ߣ౒หߢታᣉߒߚ߽ߩߢ޽ࠅ㧘㑐ଥฦ૏ߦߎߩ႐ࠍ୫ࠅߡෘߊ߅␞ࠍ↳ߒ਄ߍ߹ߔ㧚߹ߚ㧘ᧄ⎇ⓥߩ৻ㇱߪ⑼ቇᛛⴚᝄ⥝ᯏ᭴ߐ߈߇ߌߩᡰេࠍฃߌߡⴕࠊࠇ߹ߒߚ㧚ෳ⠨ᢥ₂
[1] L. Li, “New formulation of the Fourier modal method for crossed surface-relief gratings,” J. Opt. Soc.
Am. A 14 (10), 2758–2767 (1997).
[2] L. Li, “Formation and comparison of two recursive matrix algorithm for modeling layered diffraction
gratings,” J. Opt. Soc. Am. A 13 (5), 1024–1035(1996).
[3] H. Hertz, Electric Waves, translated ed. (Dover, New York, 1962).
[4] ጤ㐳␭િ,‫ޟ‬ᢔੂⴕ೉ᴺࠍ↪޿ߚࡈࠜ࠻࠾࠶ࠢ⚿᥏ߩశቇᔕ╵⸃ᨆ‫ޠ‬SENAC 39 (3), 25–32(2006).
[5] ጤ㐳␭િ,‫᦭ࠆߌ߅ߦ࡞ࠕ࡝࠹ࡑ࠲ࡔޟ‬ലశቇቯᢙߩ᳿ቯᴺߣᔕ↪‫ޠ‬SENAC 40 (3), 5–14 (2007).
[6] ጤ㐳␭િ,‫ޟ‬ㆮવࠕ࡞ࠧ࡝࠭ࡓࠍ↪޿ߚశᯏ⢻ᕈੱᎿ᭴ㅧ૕ߩត⚝‫ޠ‬SENAC 41 (3), 43–51(2008).
[7] ጤ㐳␭િ㧘‫࠱ࡔޟ‬๟ᦼ᭴ㅧ૕ߦ߅ߌࠆ㔚⏛ᵄᢔੂߩ㜞♖ᐲᢙ୯⸘▚‫ޠ‬SENAC 42 (4), 9–18 (2009).
[8] ጤ㐳␭િ㧘‫ޟ‬Ⓧጀࡊ࡜࠭ࡕ࠾࠶ࠢ⚿᥏ߦ߅ߌࠆశᯏ⢻ᕈ⊒⃻‫ޠ‬SENAC 44 (2), 49–56 (2011).
[9] ጤ㐳␭િ㧘‫ޟ‬㊄ዻ࠽ࡁ᭴ㅧࠍ฽߻৻⥸ࡈࠜ࠻࠾࠶ࠢ⚿᥏ߩశቇᔕ╵⸘▚ࠦ࡯࠼ MPI ൻߦࠃࠆ㜞ㅦൻ‫ޠ‬SENAC 45 (3), 9–16 (2012).
[10] A. D. Rakíc, A. B. Djuriši. J. M. Elazar, and M. L. Majewski, “Optical properties of metallic filmsfor vertical-cavity optoelectrionic devices,” Appl. Opt. 37 (22), 5271–5283 (1998).
[11] COMSOL Multiphysics, http://www.comsol.com[12] S. Zhang, W. Fan, N. C. Panoiu, K. J. Malloym, R. M. Osgood, and S. R. J. Brueck, “Experimental
Demonstration of Near-Infrared Negative-Index Metamaterials,” Phys. Rev. Lett. 95 (13), 137404(2005).
[13] M. Iwanaga, “First-principle analysis for electromagnetic eigen modes in an optical metamaterial slab,”
Prog. Electromagn. Res. 132, 129–148 (2012).
[14] M. Iwanaga, “Photonic metamaterials: a new class of materials for manipulating light waves,” Sci.
Technol. Adv. Mater. 13 (5), 053002 (2012).