Optical Measuring

MICROSCOPE UNITS AND OBJECTIVES(UV, NUV, VISIBLE & NIR REGION)

Catalog No. E14020(6)Wide range of microscope units and objective lenses lineup based on
Mitutoyo's proprietary optical technologies and precision processing
technologies cultivated over many years.
Used by customers around the world for a wide variety of applications.
Applications : Production of semiconductors, electronics, liquid crystals, etc
Optical systems for quality control systems and experimental research equipment
Built-in optical units for visual inspection systems
Observation of microorganisms and other moving objects* We also accept custom orders for products not listed in this catalog, so please feel free to contact us for more information.

Ref.: “ Microbio-World Ver.7, ”>（http://elfe.miyakyo-u.ac.jp/opac/2008/03/cd_2.html）

2

3

Applications
Contents

Optical inspection with wide field of view

White light interference analysis

Microscope unit for incorporating in Equipment

VMU ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ 6White Light Interference Optical Unit

WLI-U ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ 16
Microscope unit

FS70 ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ 20
Objectives for Bright-field (long working distance)

M Plan Apo ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ 26
Objectives for Bright-field (with cover-glass thickness compensation)

WIDE VMU-HR

WLI-U + interference objective lens*System example with fixed
stand/stage

Lineup supporting various observation methods, including bright-field, darkfield, polarizing, differential interference, near infrared, high resolution, etc.
Inspection process can be streamlined with wide field of view model.

Compact design realizes non-contact high-accuracy fine surface shape analysis
through white light interference.
⇒ 3D shape measurement, 3D roughness measurement

See video from here.
https://bcove.video/3Kp07QU

G Plan Apo ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ 28
Objectives for Bright/Dark-field (long working distance)

BD Plan Apo ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ 29
Near-infrared Objectives for Bright-field

M Plan Apo NIR ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・30
Near-infrared Objectives for Bright-field (with cover-glass thickness compensation)

Laser fine machining

LCD Plan Apo NIR ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ 31

IR analysis/inspection

Near-ultraviolet Objectives for Bright-field

M Plan Apo NUV・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ 32
Near-ultraviolet Objectives for Bright-field (with cover-glass thickness compensation)

LCD Plan Apo NUV ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ 33
Ultraviolet Objectives for Bright-field

M Plan UV ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ 34
Flaking of polyimide membrane

Ultraviolet Objectives for Bright-field (With cover-glass thickness compensation)

LCD Plan UV ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ 35
Tube lensMT ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ 36

WIDE VMU-HR+ NIR objective
UV laser application using VMU-L4B(Source of photographs: V-Technology Co.,Ltd.)

Objectives compatible with YAG lasers (1064 nm, 532 nm, 355 nm and 266 nm)
allow high precision and quality working.
> Removal of protective films/organic films, etc> Cutting of IC wiring (Au, Al) and exposure of lower layer pattern> Fine photomask and FPD repair, etc

Infrared analysis inspection is possible in combination with a microscope unit
supporting NIR series objective lenses.
> Transmission analysis of silicon materials> Non-destructive evaluation of MEMS interiors> Internal observation of semiconductor packages (IC)/wafer junction voidevaluation> Infrared spectral characteristics analysis, etc

High/low magnification microscope (dual-camera)

All-focused image generation

Color filter working

2/3 inch Camera(low magnification)
1/2 inch Camera(high magnification)

Two camera can be used by mounting a
constant magnification camera mount on
the VMU-LB/LB4 laser port.
⇒ The same area can be observed
simultaneously at different magnification(Low magnification: 2/3" camera, highmagnification: 1/2" camera, etc.)

4

You can download the CAD data, spectral transmission characteristics, and focal
point on the image side data for each product.
For details, please check our website.
https://www2.mitutoyo.co.jp/eng/products/gazoukogaku/lens.html

Objectives for Measuring Microscopes

ML ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ 37
Objectives for Centering microscopes

CF ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ 38
Wide field of view Eyepieces & Reticles

WF ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ 39
Reference:Specifications of Objective Threads/
Transmission of Mitutoyo Objectives ・・・・・・・・・・・・ 40
Commentary:
Laser Operating Method and Precautions ・・・・・・ 41
Glossary ・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・・ 42

TAGLENS-T1

Ultra-high-speed focus range variation from low- to high-magnification lens,no mechanical vertical drive for focused images, arbitrary cross-section image
acquisition possible.
*For details, see the No. 14025 TAGLENS catalog

5Microscope unit for incorporating in Equipment

VMU

VMU-V

VMU-H

VMU-LB

VMU-L4B

Objectives shown mounted on tubes are optional.

FeaturesFeatures> Small, lightweight microscope unit
> Compatible with infrared optical systems*1> Custom-order is available to meet the customers' requirements*3> Can be used with YAG (near-infrared, visible, near-ultraviolet,
or ultraviolet) lasers.*2 (Suitable for cutting, repair and removing andprocessing thin-film.)> Models with enhanced rigidity and performance> Custom-order is available to meet the customers' requirements*3

WIDE VMU-HR

WIDE VMU-BDVWIDE VMU-BDH
Objectives shown mounted on tubes are optional.

FeaturesFeatures> Observation over a wide field of view (Image field of ø30 mm)> Compatible with HR series of high resolving power lens (Designedwith pupil diameter of ø16.8)> Greatly enhanced brightness on the periphery of the field ofview (Reduces the dependence on the light distribution characteristics.)> Compatible with infrared optical systems*1> Small optical observation system (Refer to page 9 for the dimensions.)> Observation over a wide field of view (Image field of ø30 mm)> Supports dark-field observation suited to inspection for foreign
objects and scratches (Instantaneous switching between bright-fieldand dark-field is possible with illumination light source on/off)> Small design available*1: An infrared source and infrared camera are necessary.

*1: A
 n infrared source and infrared camera are necessary.
*2: The performance and safety of laser-equipped system products is not guaranteed.
*3: The design and manufacturing of the VMU series can be adapted to meet the customers’ requirements: differential interference observation, dual camera setup (double magnification: high and low), etc.

Specifications
Model No.
Code No.
Camera mounting orientation
Observation
Optical features
Camera
port
Mount

VMU-V
378-505
VerticalBright-field/Erect image

VMU-H
VMU-LB
VMU-L4B
378-506378-513378-514
Horizontal
Vertical (rotatable)
Bright-field/Inverted image
Bright-field/Erect image
Magnification: 1X; Wavelength (λ): visible radiation
C-mount with centering and parfocal
C-mount (centering and parfocal adjustment)
adjustment and green filter switch
Built in 1X (visible - NIR)
Built in 1X (NUV - NIR)
Built in 1X (UV - NIR)
Magnification: 1X
Magnification: 1X
λ: 355/532/1064 nm
λ: 266/355/532/1064 nm
YAG laser source
YAG laser source—(fundamental and second, third and(fundamental, second and third
fourth harmonic mode) available
harmonic mode) available
With parfocal adjustment
Available for observation
Available for observation and laser applications
M Plan Apo, M Plan Apo HR (50X, 100X) M Plan Apo SL, G Plan Apo
NIR series

Tube lens (correction range)
Opticaltube

Optical features
Laser port
Mount
Polarizer unit *1
For observation

Suitable objective(optional)

For laser cutting

Applicable camera
Optical system epi-illumination
Illuminated lens tube
Illumination unit (optional)
Main unit mass

—

650 g

NIR series, NUV series, UV series

2/3 inch or smaller
Telecentric with aperture diaphragm
Bright-field illuminated lens tube
Fiber illumination unit (LED) (No.176-386), Fiber-optic illumination unit (150 W) (No.176-316)
750 g
1270 g*1: M Plan Apo 1X objective should be used together with a polarizer (378-710 or 378-715).
Note : Observe the following precautions when using VMU-LB or L4B with YAG laser source attached.
1. Be aware of the laser power and energy density. Otherwise, the optical system may be damaged.
2. Check the mass of the laser source. When mounting on a high-speed device or acceleration/deceleration device, please contact us.

6

NIR series, NUV series

1300 gBright-field

InfraredDark-fieldSpecifications
Model No.

For Bright-field Observation
WIDE VMU-HR
378-519
VerticalBright-field/Erect image

For Bright/Dark-field Observation
WIDE VMU-BDVWIDE VMU-BDH
378-517378-518
VerticalHorizontal
Bright/Dark-field/Erect image
Bright/Dark-field/Inverted image

Code No.
Camera mounting orientation
Observation
OpticalMagnification: 1X Visible light - Near-infrared light
Magnification: 1X Visible light
Camerafeaturesport
F-Mount, C-Mount (with aligning and parfocal adjustment mechanism)
Mount
OpticalImaging forming (tube) lens
Built in 1X (visible - NIR)
Built in 1X (visible)
tube
Image field
ø30 mmMountable
Polarized unit *1
M Plan Apo, M Plan Apo HR, M Plan Apo SL, G Plan Apo, NIR series
BD Plan Apo
Objective lens (required option)
Applicable camera
Diagonal line length: 30 mm or less (equivalent to APS-C format)
Telecentric illumination, Bright/Dark-field illumination optical tube
Optical system epi-illumination
Telecentric (Pupil diameter of ø16.8 with aperture diaphragm)(Dual-port fiber-optic illumination)
Bright/Dark-field switching with light source on-off
Bright-field illuminated lens tube (rotatable) *3
Bright-field illuminated lens tube (rotatable) *3
Illuminated lens tube
LED adapter and fiber adapter included as standard
Illumination unit (optional) *2
Fiber illumination unit (LED) (No.176-386), Fiber-optic illumination unit (150 W) (No. 176-316)
Main unit mass
1400 g2000 g2150 g*1: Polarized observation by Bright-field illumination*2: Support for third-party LED illuminators (WIDE VMU-HR only)*3: The fiber (light source) mount orientation can be changed.

7

+0.1

ø14 +0.05 (Compatible with third-party fiber-optic cables)+0.1

ø14 +0.05

Adapter for Mitutoyo
fiber-optic cable

Adapter

ø14 +0.1+0.05 (Compatible with third-party fiber-optic cables)

+0.1

LED

ø10 +0.1+0.05 (Compatible with Mitutoyo fiber-optic cable)ø14 +0.05

Adapter for Mitutoyo
fiber-optic cable

Adapter

ø8.2

+0.1

ø10 +0.05 (Compatible with Mitutoyo fiber-optic cable)
Hexagon socket set screw (M4)for clamping fiber light guidefor clamping LED light source

for clamping LED light source

19

LED light source edge position(effective apperture ≧ ø5)

12

Fiber-optic cable end position

6.5

Workpiece surface

59.5

Workpiece
surface

27

167.9
188.5
50

85

330

46.5
76.5
27
283.5
85

46.5

110
63.5

60

Objective
mount

Objective(optional)
Workpiece surface

Workpiece surface

54

64
27

64

Fiber mounting
position (BF)
Fiber mounting
position (DF)(Emblem)

64
27

85

Fiber mounting
position (DF)(Emblem)

221.7
Intermediate image
position

Fiber mounting
position (BF)

3

4-M4×0.7 screw holes, depth 6(equal numbers of holes
at the same positions on the opposite side)

285.2
426.7

146.2

308.4

47

146.5
70.5

164.2

95

6.5

46.5
F mount(equal numbers of holes
at the same positions on the opposite side)

164.2

43.5

WIDE VMU-BDH

146.5
3
64
60
70.5
Intermediate image position Intermediate image
position
F mount

Objective
mount

50
92.5

Objective(optional)

Workpiece surface

4-M4×0.7 screw holes, depth 6

380.2
54

Objective
mount(Emblem)

32

79.6

13.6
(equal numbers of holes
at the same positions on the opposite side)
portionFiber-optic cable mounting position3

Objective(Optional)
Workpiece surface

WIDE VMU-BDV

6-M4×0.7 screw holes, depth 627120Workpiece
surface50

27(Emblem)

Objective
mount(Parfocalizing distance)

20.5

Intermediate image position
C mount
49.5

Intermediate image
position
25.07
ø3
Laser mount

64(Same position and number
on the other side)

27

50
92.5

ø43

ø43

27 27

214.5
102.5

Intermediate image
position

64

83.5
3
60
Image position
F mount
Light souce mounting
position
4-M4×0.7 depth 64-M4×0.7 depth 6

95 (Parfocalizing distance)

59.5

27 27
76
106

ø35
(Emblem)

47

47

Objective(optional)Intermediate image
position
ø56

49.5

mounting position

3(Emblem)

94.5

27 27

120

3

76
106
43.5

Objective(optional)

Workpiece surface

8(equal numbers of holes
at the same positions on the opposite side)
portionFiber-optic cable mounting position27
Objective
mount

ø50
Intermediate image
position

308.4

50

6-M4×0.7
6-M4×0.7screw
screwholes,
holes,depth
depth 66

213.4

C mount

VMU-L4B

13.6

Intermediate image
positionIntermediate image
position
25.07
ø3
Laser mount

79.6

Intermediate image
position
ø56

94.5
ø43

95 (Parfocalizing distance)

Objective(optional)

17.5

106
20.5

ø43

20.5

17.5

(Emblem)

213.5
101.5

ø50
Intermediate image
position

27

113.5
89.5

27
27

152.5
247.5
95 (Parfocalizing distance)
76

VMU-LB

50
27

C mount

32

6.5 Fiber-optic cable

213.4

Fiber-optic cablemounting position

59.5
43.5

76
106

6-M4×0.7 screw holes, depth 6

17.5

80.5
63

Diagram of fiber mount (WIDE VMU)

WIDE VMU-HR

6-M4×0.7 screw holes, depth 6

C mount(equal numbers of holes
at the same positions on the opposite side)

Diagram of LED light source mount(equal numbers of holes
at the same positions on the opposite side)

47

Parfocalizing
95 ( distance )

50

3

20.5

Intermediate
image position

VMU-H

6.5

59.5
43.5

Parfocalizing
95 ( distance )

17.5

VMU-V

Diagram of fiber mount (VMU)

95 (Parfocalizing distance) 85

Diagram of LED light source mountFiber-optic cable end position(Fiber effective diameter of ø5 or greater)

253.7

12

10

12

LED light source edge position(effective apperture ≧ ø5)

10

8

8

(2)

19

Hexagon socket set screw(M4)

12

ø8.2
Hexagon socket set screw(M4)

(2)

LED

348.7

VMU
Dimensions

Objective(optional)
Workpiece surface

Workpiece surface

9

VMU System diagram
WIDE VMU

VMU

F-mount compatible analog camera or digital camera

C-mount compatible analog camera or digital camera

Third-party YAG lasers*5

Fixed-magnification monitoring
camera mount(378-087) P.13*4

2X TV adapter unit
(378-703)
0.5X TV adapter unit *1(378-704)
P.13

C-mount adapter

WIDE VMU-HR(378-519)
VMU-V/H(378-505/378-506)

C-mount compatible analog camera or digital camera

WIDE VMU-BDV/BDH(378-517/378-518)

VMU-LB/L4B(378-513/378-514)

Focusing unit C(378-718)
P.13
Focusing unit A(378-705) P.13

Focusing unit B*2(378-706) P.13

Bright-field revolver(378-724)
P.12 4穴
Manual revolver nosepiece unit (for BF)*2(378-707)(378-717)
Quad
P.12

Polarizer (B)(378-715)
P.13

Polarizer(378-710)
P.13

Polarizer (C)(378-719)
P.13

Bright/Dark-field power revolver(378-727)
P.12 Quad

Bright-field power revolver(378-726)
P.12 Quintuple

Simple stand(378-730)
P.25

A
D

C D

S T AT US

UR R E T

CTransmitted light unit
(378-736)
P.25

POWER

E

Transmitted light unit
(378-736)
P.25

LED adapter(02AVB662)
P.13

Objectives

Quintuple

POWER T

A B

B

Self-aligning power revolver
nosepiece unit (for BF) *3(378-713) P.12

Simple stand(378-730)
P.25

Bright/Dark-field revolver(378-725)
P.12 4穴

Objectives
BD Plan Apo series(for observation) All types on P.29

M Plan Apo series (for observation)
All types on P.26 to 28

LED spot illuminationfrom various manufacturers

G Plan Apo series (for observation)
All types on P.28
Objectives
M Plan Apo series (for observation):
All types on P.26 to 28
G Plan Apo series (for observation):
All types on P.28
NIR series on P.30 to 31(for fundamental/second harmonic laser
machining)(for near-infrared observation)

Fiber illumination unit
(LED) (176-386)
P.25

Fiber-optic
illumination unit 150 W(176-316)

X-Y stage (50×50 mm)(378-020)

Third-party motorized
X-Y stages(50×50 mm)*6

NIR series on P.30 to 31(for fundamental/second harmoniclaser machining)(for near-infrared observation)

LED adapter (included
as standard)
P.13

P.25
LED spot illuminationfrom various
manufacturers

Fiber illumination unit
(LED) (176-386)
P.25

Fiber-optic illumination
unit 150 W (176-316)

X-Y stage (50×50 mm)(378-020)

Third-party motorized
X-Y stages (50×50 mm)*1

P.25

NUV series on P.32 to 33(for second/third harmonic laser machinin)
UV series on P.34 to 35(for second/fourth harmonic laser machining)*1: Compatible with 1/2-inch or less C-mount cameras.
*2: Use focusing unit B (378-706) if the distance between the mounting position and VMU
main unit isdesired to be as small as possible. If the manual revolver nosepiece unit (378707) is used concurrently, mount the unit in front of the VMU main unit. For details onmounting position, refer to the figures on page 14.

10*3: This revolver nosepiece unit cannot be used with focusing unit B (378-706). For details onmounting position, refer to the figures on page 14.
*4: Use this mount when mounting a C-mount camera using the laser port. Use this mount for
2/3-inchor smaller cameras.
*5: Mitutoyo does not handle these lasers. Consult Mitutoyo for more information.
*6: An adapter may be required when mounting any of these stages. Consult Mitutoyo formoreinformation.

*1: An adapter may be required when mounting any of these stages. Consult Mitutoyo for more information.

11

Optional Accessories for VMU
Manual revolver

Focus unit

Up to 4 objective lenses can be mounted.

For manual focusing. With A and C mounted on a simple stand, the stand stage center and optical axis match.

Bright-field revolver
378-717

Code No.
Observation method378-707

No. of objective mounts

4 (Reference hole)

Mass

780 g

Installed on 378-717 VMU-V
with optional objectives

Bright-field
4 (1 reference hole and 3 holes withcentering and parfocal adjustment)
990 g

VMU-V, VMU-H, VMU-LB, VMU-L4B

Applicable models

Installed on 378-724 WIDE VMU-HR
with optional objectives

378-724Bright-field

Bright/Dark-field revolver
378-725Bright/Dark-field

4 (Reference hole)

4 (Reference hole)

825 g

755 g
WIDE VMU-BDVWIDE VMU-BDH

WIDE VMU-HR

Focus unit A mounted on WIDE VMU-V with an optional objective

Focus unit C mounted on WIDE VMU-HR with an optional objective

Focus unit A
378-705

Focus unit B
Focus unit C
378-706
378-718
50 mm
Coarse: 3.8 mm/rev., Fine: 0.1 mm/rev.
Approx. 17.4 kg
Approx. 17.7 kg
2.9 kg
2.7 kg
VMU-V, VMU-H, VMU-LB, VMU-L4B
WIDE VMU-HR, WIDE VMU-BDV, WIDE VMU-BDH

Code No.
Travel range
Coarse/fine feed
Loading capacity
Mass
Applicable models

Power revolver

Polarizer and Analyzer

Up to 5 objective lenses can be mounted on the bright-field power revolver.
Up to 4 objective lenses can be mounted on the bright/dark-field power revolver.

Provides simplified polarized light observation. Also enhances contrast of low-magnification objectives.

No.378-710

No.378-719

No.378-715

Polarizer and Analyzer

378-710
VMU-V, VMU-H

Code No.
Applicable models

No.378-726

No.378-727

Installed on No.378-713 VMU-V
with optional objectives

Bright-field power revolver
Code No.
Observation method
No. of objective mounts
View field adjustment
Positioning accuracy
Durability (life-time)
Drive method378-713Power supply

AC100 V - 240 V Max. power consumption is approx. 10 W

Output interface*1
Cable length
Dimensions (WxHxD) and mass
Applicable models

378-726Bright-field
5 (1 reference hole and 4 holes with centering adjustment)±0.5 mm
2 σ = 3 μm
1 million repositioning operations
DC motor

Installed on No.378-726 WIDE VMU-HR
with optional objectives

Bright/Dark-field power revolver
378-727Bright/Dark-field
4 (Reference hole)−−−−

AC100 V - 240 V
Max. power consumption is approx. 6 W

1

RS-232C* for external PC control
2.9 m*2 (connection of power revolver and console box)
Revolver: 130x47x186 mm,1.8 kg,
Console box: 108x63x176 mm,810 g
VMU-V, VMU-H, VMU-LB, VMU-L4B
WIDE VMU-HR

Revolver: 164x65x137 mm,1.8 kg,
Console box: 108x72x193 mm,810 g
WIDE VMU-BDV, WIDE VMU-BDH*1: Optional RS-232C Cable: 12AAA807*2: The length of cable connecting the power revolver and console box is a safe maximum and therefore Mitutoyo does not guarantee error-free operation if a cable extension is used to increase total cable length.

12

Polarizer and Analyzer (C)378-719
WIDE VMU-HR, WIDE VMU-BDV, WIDE VMU-BDH

378-715
VMU-LB, VMU-L4B

TV adapter unit
C-mount adapters for changing to a higher or lower magnification.
2X TV adapter unit
0.5X TV adapter unit378-703378-704
0.5X
2X
2/3 inch or smaller type
1/2 inch or smaller type
Approx. 25 g
VMU-V, VMU-H, VMU-LB, VMU-L4B

Code No.
Magnification
Suitable camera
Mass
Applicable models

Camera mount

Code No.
Suitable camera
Mass
Applicable models

No.378-704

LED Adapter

Can be attached to the laser mount(VMU-LB and VMU-L4B) for dual-camera system.
Camera mount378-087
2/3 inch or smaller type (C-mount)
Approx. 180 g
VMU-LB, VMU-L4B

No.378-703

Code No.
Mass
Applicable models

LED Adapter
02AVB662
Approx. 12 g
VMU-V, VMU-H,
VMU-LB, VMU-L4B*For WIDE VMU, standard accessory.

ø14 +0.1
+0.05
ø8.2

Hexagon socket set screw(M4)for clamping LED light source

8

No.378-725

12No.378-724

LED light source edge position(effective apperture ≧ ø5)

No. 02AVB662

No. 378-087

13Dimensions of Optional Accessories for VMU

(4)

56

7.5

ø69
126.5
140
144

ø70

98.5

157
7.5
(4)

Main body

5

Camera lens tube

Analyzer
30 6

)

41 2

152.5

Analyzer
Illuminated lens tube
Cover ring
Polarizer

Illuminatedlens tube

7641.5 15
20.5

Polarizer

27 27

95

ø45

54
85

( Parfocalizing
distance ))Polarizer and Analyzer (C)Polarizer

Note: The analyzer is installed by removing the Illuminated lens tube.
The polarizer is installed by removing the vertical illumination unit with aperture diaphragm.

27
85Single mount unit

68.5
20.5

ø14 +0.1+0.05

75Intermediate image position

Dimensions with the 0.5X TV adapter
unit mounted

ø8.2

64.2

17.5
60.5

17.5
152.5

17.5

Dimensions with the 2X TV adapter
unit mounted

LED Adapter

12Note 1: Revolver is installed by removing the single mount unit, but the distance between
the mounting position of WIDE VMU main unit and the stage is unchanged.
Note 2: Revolver mounting direction is limited to the direction indicated in the above figure.

2X adapter
lens unit

Intermediate image position
C mount
0.5X adapter
lens unit

Camera mount(Difference in dimension fromthe case where no adapter lensunit is used: 0mm)

Single mount unit

170.7

(

)

54
85
95
Parfocalizing
distance)(

Intermediate image position
C mount(Difference in dimension fromthe case where no adapter lensunit is used: 18.2mm)(

Note 1: The middle optical tube and lens mount must be removed from VMU.
Note 2: The orientation of the revolver can be freely set to the mounting surface.

TV adapter unit

54

95
95

When mounting the revolver on VMU-LB or VMU-L4B

Polarizer

Note: The analyzer is installed by loosening the cover ring.
The polarizer is installed by removing the vertical illumination unit with aperture diaphragm.

MAX 8095
85
Parfocalizing
distance 29.1

87
136
136
87
MAX126*
MAX77*
MAX126*
MAX77*** Where
M
Plan
Apo
Where M Plan Apo NIR
NIR HR100X
HR100X (378-864-5)(378-864-5) isis used
used

Workpiece
Workpiece
surfacesurface

Cover ring

When installing the polarizer on VMU-LB or VMU-L4B

27
27 27
27

Mount
Mount unit
unit

Vertical illumination
tube with aperture
diaphragm

Analyzer

95(Parfocalizing
distance ))27

Note: The polarizer is installed by loosening the cover ring.
The analyzer is installed by removing the camera lens tube.

27

76
76

41.5 2727
41.5
Intermediate
Intermediatelens
lens tube
tube

Parfocalizing((Parfocalizing
distance ))distance

53.7
53.7

(4)

Installing the polarizer and analyzer on VMU-V or VMU-H

MAX 78Bright/Dark-field power revolver (378-727)
MAX 132
88

27 27
27
27
M20×0.5
M20×0.5

76
76
95
95

27 31.5

25 25
126.5
140
144

Focusing unit B

7.5

126.5
140
144

ø70
ø69

63.5
94
102

1

Analyzer

Note 1: Revolver is installed by removing the single mount unit, but the distance between
the mounting position of WIDE VMU main unit and the stage is unchanged.
Note 2: Revolver mounting direction is limited to the direction indicated in the above figure.

27
27

27
27

(Parfocalizingdistancedistance) ) 32
32
(Parfocalizing(4)

Workpiece surface

95
85
Parfocalizing
distance 29.1

76
76
95
95

53.7
53.7

95
95

(Parfocalizingdistancedistance)) 32
32(Parfocalizing

Parfocalizing((Parfocalizing
distance ))distance

136
87
Workpiece13687Workpiece surface
surface
MAX78*
MAX130*MAX130*MAX78*** Where
Where M
M PlanPlan Apo
Apo HR100X
HR100X (378-815-4)(378-815-4) isis used
used

Note 1: The lens mount must be removed from VMU.
Note 2: The orientation of the revolver can be freely set to the mounting surface.

14

63.5
94
102

Focusing unit C

27

27
27

When mounting the revolver on VMU-V or VMU-H

88.6
88.6

1

ø38+0.05
0ø56

Hexagon socket set screw(M4)for clamping LED light source

8

27 27
27
27

27 27
27
27
76
76

M20×0.5
M20×0.5

Workpiece
Workpiece
surfacesurface

73

56

25 25
27 27 4.5
148

73

Vertical illumination
unit with aperture
diaphragm

Single mount unit

Bright-field power revolver (378-726)
MAX 130
87

88.6
88.6

48
80

(

Bright-field power revolver (378-713)

Workpiece
Workpiece
surfacesurface

32

Hole positions for mounting onto the main unit
5-M4 screw holes, depth 822995Power revolver

5-M4 screw holes,
depth 8

229
63.5

28

Note 1: Revolver is installed by removing the single mount unit, but the distance between
the mounting position of WIDE VMU main unit and the stage is unchanged.
Note 2: Revolver mounting direction is limited to the direction indicated in the above figure.

Note 1: The middle optical tube and lens mount must be removed from VMU.
Note 2: The orientation of the revolver can be freely set to the mounting surface.

(37)

(4)

56

89.5

85

54
85
95

(

When mounting the revolver on VMU-LB or VMU-L4B

117

Polarizer and Analyzer

Parfocalizing
distance 29.1

76 76 27 27
27 27
Workpiece
surfaceWorkpiece
surface* Where M Plan Apo NIR HR100X (378-864-5) is used
* Where M Plan Apo NIR HR100X (378-864-5) is used

(4)

63.5

23.5 26.5
50

MAX 8127

95 95

Intermediate
lens
tube
Intermediatelens tube
Mount unit
Mount unit

( Parfocalizing( Parfocalizing) )distance
distance

27
27

(37)

87.6

95
MAX 132
76.5

Focusing unit A

Vertical travel

Bright/Dark-field revolver (378-725)
27
27

63.5
94
102

1

73

89.5

MAX 77*
MAX 77* 108
108

41.541.527 27

distance) 76 27 2727 27
95 (Parfocalizing
distance) 76
95 (Parfocalizing
32 32

23.5 56.5
80

Single mount unit

Note 1: Revolver is installed by removing the single mount unit, but the distance between themounting position of WIDE VMU main unit and the stage is unchanged.
Note 2: Revolver mounting direction is limited to the direction indicated in the above figure.

Note 1: The lens mount must be removed from VMU.
Note 2: The orientation of the revolver can be freely set to the mounting surface.

Workpiece
surfaceWorkpiece
surface(Parfocalizing
distance )Workpiece
surfaceWorkpiece
surface

27

27
85

95 95

95

Mount unit
Mount unit

When mounting the revolver on VMU-V or VMU-H

MAX 126*
78MAX 126*
78

148

27

27
27

( Parfocalizing( Parfocalizing) )distance
distance

76 76
27 27
27 27

distance) 76 27 27
95 (Parfocalizing
distance) 76
95 (Parfocalizing
27 27
32 32

* Where M Plan Apo HR100X (378-815-4) is used
* Where M Plan Apo HR100X (378-815-4) is used

MAX 78

ø70
ø69

MAX 13076.5

25 25
27 27 4.5

MAX 78*
MAX 78*27
27

Workpiece
surfaceWorkpiece
surface

Hole positions for mounting onto the main unit
5-M4 screw holes, depth 8
229
63.5

(37)

117
Vertical travel(Parfocalizing
distance ) 29.1

MAX 130*
76.5
MAX 130*
76.5

Focus unit

Bright-field revolver (378-724)

247.5

Bright-field revolver (378-707/378-717)

Parfocalizing
distance

Manual revolver

LED light source edge position(effective apperture ≧ ø5)

15

White Light Interference Optical Unit

Objective lens for white light interference measurement

WLI-Unit

WLI Plan Apo
WLI-Unit

Scheduled for autumn 2024 release

Features> New design matching the WLI-Unit> Ensures long working distance while more compact and lighter-weight (parfocal 60 mm)> High NA, high resolution> Plan Apochromat> Beam splitter and reference mirror mounted inside objective lens
> Interference fringe adjustment mechanism equipped as standard

Objectives shown mounted on tubes are optional.

Dimensions
FeaturesWLI Plan Apo 2.5X

WLI Plan Apo 5X

WLI Plan Apo 10X

WLI Plan Apo 25X

WLI Plan Apo 50X

ø40
M20.32/36山

ø40
M20.32/36山

ø40
M20.32/36山

ø40
M20.32/36山

58.5

>N
 on-contact high-accuracy fine surface texture measurement is possible through whitelight interference: 3D shape measurement, 3D roughness measurement.

Specifications

WLI measurement(WLI-Unit-003/005/010
common)WLI-Unit Controller

Software
Other

5

5

ø38

(Working distance)2

ø38

Lens Specifications

Code No.
Model

WLI-Unit Sensor Head

ø38

(Working distance)
3.6

ø38

(Working distance)
6> Compact and lightweight(Working distance)
8

13Working( distance)> High robustness with regard to disturbance vibration

58
60(Parfocalizing distance)

ø20

Supports high aspect ratio shape measurement through detection not dependent on optical-based NA

56.4
60(Parfocalizing distance)> High
aspect ratio measurement

54
60(Parfocalizing distance)

22.1

52
60(Parfocalizing distance)

Measurement enabled with high Z-resolution even with low-magnification lens47
60(Parfocalizing distance)

5> Heightmeasurement accuracy not dependent on optical magnification

5

5

ø35

Cable length (m)Applicable objective lens*Optional selection
Tube lens magnification
Focal range (f mm)
Scanning mechanism
Size/Weight
Z motion range
Measurement mode
WLI measurement Z range
Throughput @20 μm range
Z resolution
Z repeatability (σ)
I/FRated voltage
Max. power consumption
Size/Weight
WLIPAKWLI-Unit Calibration SW
Analysis software (recommended option)
Frame grabber/PC

554-001
WLI-Unit-003
3554-002WLI-Unit-005
5554-003
WLI-Unit-010
10

FOV (mm)
N.A.

W.D.
(mm)

f (mm)

R (µm)

Parfocalizing
distance(mm)

WLI-Unit

2/3 inchcamera

0.14

13.0

40

2.0

60

2.94×2.25

2.64×3.52

WLI Plan Apo 5X

0.28

8.0

20

0.98

60

1.46×1.12

1.32×1.76

100

5236.4 (excludinginterference unit)
58.5 (Max)40

WLI Plan Apo 10X

0.38

6.0

10

0.72

60

0.73×0.56

0.66×0.88

100

54

40

WLI Plan Apo 25X

0.50

3.6

4

0.55

60

0.29×0.22

0.26×0.35

100

57

40

290

WLI Plan Apo 50X

0.70

2.0

2

0.39

60

0.14×0.11

0.13×0.18

100

58

40

300

Model

WLI Plan Apo series
1X
100
Mitutoyo Objective Lens Scanner
108x68x191 mm / 1.7 kg
8000 µm
High throughput
Standard
High resolution
2100 µm
1900 µm
1700 µm
3.0 s
4.0 s
6.0 s
−
4 nm
−
40 nm
WLI-Unit sensor head terminal/stop connector/GigaBit Ethernet: 2 ch
AC100〜240 V / 50, 60 Hz
20 W
196x180x108 mm / 2.3 kg
WLI-Unit control library (SDK), sample code, WLIPAK Sample GUI
Pixel calibration
MCubeMap
Matrox frame grabber/PC separate

Mirrortube
Applicable
lengthOutermost diameter Mounting screws
tube lens(excluding
f (mm)
mountingscrews)Mass(g)

WLI Plan Apo
WLI Plan Apo 2.5X

100

47

320
RMS / 20.32 mm
×36 TP

210
220•Resolution values in the specifications above are calculated based on reference wavelength (λ = 0.55 μm).

Recommended PC specifications
OS: Windows 10 Pro 64 bit/Windows 11 Pro 64 bit, CPU: Xeon Processor 8 Core (2.0 GHz or above), memory: 8 GB or above, storage: 25 GB or above, optical drive: DVD-ROM drive (for software installation), communication port: RJ-45 × 1 port (EtherNET), extension slots: PCI Express 3.0 × 8 or above

16

17

WLI Measurement Example

WLI System Configuration(example with stand/motorized stage/vibration isolation table)

Stand*

Roughness Specimen 3 μm

Semiconductor Test Pattern (TEG)PC

WLI-Unit
Sensor HeadWLIPAK SampleGUI

Implements WLI measurement

MCubeMap

Implements analyses

WLI-Unit
Controller*Image is for illustration purposes
Ex.: 3D display
Vibration Isolation Table*
Provided by Walts Co., Ltd. and ASK INDEX*Stand and vibration isolation table are recommended products

Dimensions
WLI-Unit Sensor Head			

180

67.8

Metal Machined Surface (Aluminum)

108

67.8

45

108
191

53

43

196

ø 2 +00 .01
50

50

127

Mounting screws

43

2 +0.01053

ø 2 +00.01

43

191

2×1/4 depth 6

Depth 4

4

45

Guide pin holes

113.5

Cu Pattern (glass substrate)

WLI-Unit Controller

50

Guide pin holes

2×1/4 depth 6

Depth 4

4

50

127

Mounting screws45

2 +0.01
043

Back mounting part

45

18

19

Microscope unit

Specifications

FS70

Model No.
Code No.
Model No.
Tilting head type Code No.

Standard head
type

FS70
378-184-1
—
—

FS70Z
378-185-1————
FS70-TH
378-184-3——
FS70Z-TH
378-185-3

FS70ZD
Made-to-order
FS70ZD-TH
Made-to-order

FS70L
378-186-1
FS70L-TH
378-186-3

FS70L4378-187-1
FS70L4-TH
378-187-3

✔

✔

✔

✔

Erect image
BF (Bright-field)
Observation
image

✔

✔

✔

✔

Polarization

✔

✔

✔

✔

✔

Differential
interference
contrast (DIC)

✔

✔

✔

✔

✔

10X (field number 24) ·15X (field number 16)· 20X (field number 12)

Eyepieces (required option)
FS70Z

FS70L

The eyepieces, revolver and objectives shown mounted are optional.

SF70 Dimensions

14

14

10

10

14
10

208
109 30 51
14

126.5

126.5
7.5

126.5

Switchable type
(Eyepiece/Tube =100/0: 0/100)

C-mount (using optional adapter B*²)
Parfocal adjustment with adapter B

Protective filter—
1X

Fixed type *¹(Eyepiece/TV =50/50)

63.5

Microscope
head

Built-in laser beam filter
1X

YAG laser source(fundamental, second
and third harmonicmode) available

—
Mount

Epi-illumination for Bright-field (Koehler illumination, with aperture diaphragm)
Fiber illumination unit (LED) (No.176-386), 150 W Fiber-optic illumination unit (No.176-316) stepless adjustment, light guide length: 1500 mm

M Plan Apo
M Plan Apo HR
M Plan Apo SL
G Plan Apo

For observation

212

Manual revolver
nosepiece unit
Quad
/ Power revolver
nosepiece unit
Quad

Self-aligning manual revolver nosepiece unit Quad /Self-aligning Power revolver nosepiece unit Quintuple

Revolver (required option)

93.4

31.7 79.6

50 mm, left and right handle

Optical system epi-illumination

For laser cutting

BD Plan Apo—

14.5 kg

13.6 kg

14.1 kg

Dimensions
Mass (main unit)

YAG laser source(second, fourthharmonic mode)
available

Uniaxial coarse and fine movement (Coarse: 3.8 mm/rev. fine 0.1 mm/rev.)

Movement

Loading *3

C-mount receptacle(with green filter
switch)(with parfocal adjustment)

Use a laser with TV
port.

Magnification: 1X
Magnification: 1X
λ : 355/532/1064 nm λ : 266/532 nm

Coarse and finemovement

82

95

MAX130153 (Mounting surface) 1
154

Switchable type
(Eyepiece/Tube =100/0: 0/100)

1X-2X zoom

Suitable objective(required option)(Parfocalizing
82 )distance353

93.4
31.7 79.6
212
93.4
31.7 79.6
212
82

Fixed type
(Eyepiece/TV =50/50)

13.2 kg

NIR Series
NUV Series*Select fromwavelengths usedby laser source
14.1 kg(tilting headtype:13.2 kg)

Self-aligning manual revolver nosepiece
unit Quad / Self-aligning Power revolver
nosepiece unit Quintuple
M Plan Apo
M Plan Apo HR
M Plan Apo SL
G Plan Apo
UV Series
14.2 kg(tilting headtype:13.5 kg)

13.9 kg(tilting headtype:13.1 kg)

6.6 kg (tilting
6.4 kg (tilting head
headtype: 7.5 kg)
type: 7.2 kg)

6.7 kg (tilting head
type: 7.5 kg)

Refer to P.20
6.1 kg

7.1 kg

6.6 kg

7.5 kg*1: It is a switchable type when using FS70ZD-TH (Tilting head type). *2: Installation is optional. *3: Loading on optical tube excluding weight of revolvers, objective lenses and eyepieces.
Note: When using the objective M Plan Apo 1X, using this lense with a differential interference contrast unit (No.378-092 or 378-094) is recommended.
Note: Observe the following precautions when using FS70L or FS70L4 with YAG laser source attached.
· Be aware of the laser power and energy density limitations of the optical system to avoid damaged.
· Check the mass of the laser source. When mounting on a high-speed device or acceleration/deceleration device, please contact us.

14

63.5
94 63.5
94

Back of standard focus unit (for all models)

63.5
94

7.5

7.5

208
109 30 51
208
109 30 51

ø10 +0.05
+0.1
+0.1
+0.05
ø7.5 ø10Fiber-optic
ø10 +0.05
cable end position
ø7.5 Fiber-optic cable end position
ø7.5 Fiber-optic cable end position
4-M4 screw holes, depth 8

Switchable type
(Eyepiece/Tube =100/0: 0/100)

Camera port
Mount

Illumination unit (optional)

Objective mounting
surface

MAX130153 (Mounting
surface) 1
MAXMAX130
154
153 (Mounting surface) 1
78
154

FS70L4

+0.1

14

38
102 63.5
229

63.5

95

MAX
78
MAX130 MAX
78
153 (Mounting surface)
1
154

82

95
82
(Parfocalizing
distance )MAX130153 (Mounting
surface) 1
MAXMAX130
154
153 (Mounting surface) 1
78
154(Parfocalizing
distance )95(Parfocalizing
distance )Objective mounting
surface Objective mounting
surface

FS70L

4-M4 screw holes, depth 84-M4 screw holes, depth 8

63.5

63.5
93.4
353
212
31.7 79.6
353

93.4
212
31.7 79.6
93.4
212
31.7 79.6
353

Objective mounting
surface

Fixed type
(Eyepiece/TV =50/50)

27.2

154
324
324
154
Intermediate image
154
Laser mountposition Intermediate
ø38imageVertical travel
Intermediate image
Laser
mount
Laser mountposition
ø3825 Vertical travel position
ø38 Vertical travel
25 25
25
25
25

82

(Parfocalizing
distance )(Parfocalizing
distance )95

95

FS70Z(FS70ZD)

38
102 63.5
22938
102 63.5
229

102
229

63.5

63.5

102 63.5
229
102 63.5
229

102 63.5
229
63.5
93.4
353
40.4 79.6
212
353

MAX
78
MAX130 MAX
153 (Mounting surface)78 1
154

82

distance

MAX130153 (Mounting
surface) 1
MAXMAX130
154
153 (Mounting surface) 1
78
154

63.5

102 63.5
229
102 63.5
229
63.5

63.5

93.4
40.4 79.6
212
93.4
212
40.4 79.6
353

95
82 )
(Parfocalizing(Parfocalizing
distance )(Parfocalizing
distance )95

Objective mounting
surface Objective mounting
surfaceObjective mounting
surface0 to 20° (only for -TH), displacement of eye point: approx.114 mm

Optical features

324

154
324
324
154
Intermediate image
154
Laser
mount
position Intermediate
ø38imageVertical travel
Intermediate image
Laser
mount
Laser mountposition
ø3825 Vertical travel position
ø38 Vertical travel
25 25
25
25
25

Siedentopf, adjustable interpupillary distance range: 51 - 76 mm

Tilt angle

Tube lens

Laser
port
27.2

324

82

Objective mounting
surface Objective mounting
surface
353

353

154
324
324
154
Intermediate image
154
position Intermediate
ø38image
Intermediate image
Vertical travel
position
ø3825 Vertical travel position
ø38 Vertical travel
25 25
25
25
25

95

*1: The performance and safety of laser-equipped system products is not guaranteed.
*2: A n infrared source and infrared camera are necessary. For more details on infrared observation,
contact your local Mitutoyo sales office.

27.2

324

20

Opticaltube

24

Eye width
adjustment

Optical pass
Trinocu- ratio
lar tube> Product range supporting various observation methods(Bright-field/Dark-field/Simple polarization/Differential interference contrast(DIC))> Equipped as standard with a Koehler illumination with aperture
diaphragm for epi-illumination optical systems> High operability with microscopes(Inward revolver design and long-working-distance objectives)> Compact microscope unit with trinocular eyepiece tube
(Suitable for observation of many different types of object: metal surfaces,
semiconductors, LCDs, resins, etc.)> Can used with YAG (near-infrared, visible, near-ultraviolet, or
ultraviolet) lasers.*¹(Suitable for cutting, trimming, repair and marking of IC wiring (Au, Al),removing and processing thin-films (insulating film) and repair of color
filters.)> Compatible with infrared optical systems*²

MAX
78 MAX
78

Field number

FS70L4

Features✔

BD (Bright-field/
Dark-field)

Detail of fiber mount (for all models)21

Optional Accessories for FS70
System diagram

Manual revolver

Power revolver

C-mount compatible analog camera or digital camera
Third-party YAG lasers*1
Differential interference
contrast unit
(378-076,
378-078,378-079, 378-080) P.23

0.5X TV adapter unit
(375-054)
P.23

Eyepieces
P.39
WF10X/24 (378-866)
WF20X/12 (378-858)

Polarizer (C)(378-094)
P.23

Polarizer (A)(378-092)
P.23

Adapter B(378-042) P.23

378-016

Code No.

378-018Bright-field
4 (1 reference hole and 3 holes with
No. of objective mounts
centering and parfocal adjustment)
View field adjustment±0.5 mm
Parfocal adjustment±0.5 mm
Mass
980 g

176-211Bright /Dark-field

Observation method

4——
1.2 kgPolarizer and analyzer
FS70(378-184-1)

FS70ZD

FS70Z(378-185-1)

FS70L(378-186-1)

FS70L4(378-187-1)

FS70-TH
(378-184-3)

FS70ZD-TH

FS70Z-TH(378-185-3)

FS70L-TH(378-186-3)

FS70L4-TH(378-187-3)

For simplified polarized-light observation. Also suitable for enhancing
contrast of low-magnification objectives.

For FS70L • FS70L4
378-094

For FS70Z
378-092

C

Quad

D
E

Quintuple

Transmitted light unit
(378-736)
P.25

Objectives
M Plan Apo series (for observation):P.26 to 28

Adapter B

Used for mounting a C-mountcamera.

Fiber illumination unit
(LED) (176-386)

NUV series on P.32 to 33(for second/third harmonic laser machining)

P.25

Fiber-optic illumination unit
150 W (176-316) P.25

UV series on P.34 to 35(for second/fourth harmonic laser machining)
X-Y stage (50×50 mm)(378-020)*1: Mitutoyo does not handle these lasers. Consult Mitutoyo for more information.
*2: An adapter may separately be required when mounting any of these stages. Consult Mitutoyo for more information.

22

ø45
Intermediate image position

67.3

NIR series on P.30 to 31(for fundamental/second harmonic laser
machining)(for near-infrared observation)

17.5

G Plan Apo series (for observation):
P.28

62.1

POWER

Objectives
BD Plan Apo series(for observation): P.29

Code No.

P.25

Magnification
100X, SL80X, SL50X
50X, SL20X
20X
10X, 5X

378-076378-078378-079
378-080

B

D

P.25

UR R E TC

S T AT US

Fiber-optic illumination unit
150 W (176-316) P.25

Self-aligning Power revolver
nosepiece unit (for BF)
Quad (378-016)
Quintuple (378-216)
P.23

Used for differential interference contrast observation in conjunction with thepolarizer.

A

POWER T

B

Fiber illumination unit
(LED) (176-386)

Self-aligning manual revolver
nosepiece unit (for BF)(378-018)
P.23
Quad

Third-party motorized
X-Y stages(50 × 50 mm) *2

378-016
176-212Bright-field
Bright /Dark-field
5 (1 reference hole
4 (1 reference holeNo. of objective mounts
and 4 holes withand 3 holes with4
centering adjustment) centering adjustment)
View field adjustment±0.5 mm—
Positioning accuracy——
2 σ = 3 μm
1 million repositioning
Durability (life-time)——
operations
Drive method
DC motor
Power supply
AC100 V - 240 V, 10 W
AC100 V - 240 V, 6 W
Output interface
RS-232C*1 for external PC control
Cable length
2.9 m*2 (connection of power revolver and console box)
Revolver: 164x65x137 mm, 1.4 kg(378-216: 130x47x186 mm, 1.7 kg)
Dimensions (WxHxD)
Console box: 108x72x193 mm, 810 g
and mass(378-216: 108x63x176 mm, 810 g)ø38 +0.05
0
ø54
74.1
378-042
View field of image: ø11 mm
Mass: 170 g

0.5X TV adapter unit

Allows observation over a wide fieldof view on the monitor (2X wide)
due to the 0.5X relay optics.
It is used in conjunction with theoptional adapter B. A C-mount isincluded.
ø45

23

122.6

Power revolver nosepiece unit
(for BF/DF)(176-212) P.23
A

Manual revolver nosepiece unit
(for BF/DF)(176-211)
P.23
Quad

378-216

Observation method*1: Optional RS-232C Cable: 12AAA807*2: The length of cable connecting the power revolver and console box is a safe maximum andtherefore Mitutoyo does not guarantee error-free operation if a cable extension is used toincrease total cable length.

DIC unit
Simple stand(378-730)
P.25

Code No.

Console box

375-054
View field of image: ø11 mm
Mass: 300 g

23

Dimensions of Optional Accessories for FS70

Optional Accessories for Microscopes

Manual revolver

Power revolverStand

378-018378-216

For mounting the VMU, WIDE VMU, or FS70 microscope unit. Can be
combined with an XY stage, stage illumination unit and fiber-optic
illuminator to work as a compact microscope for surface observation.

（47）

ø50
D

E

（50.7）（130）

Stand with XY stage and stage illumination
unit mounted on FS70Z with optional
objectives and eyepieces176-212/378-016

176-211

32
59

40
96
152
120
96
180

Code No.
Travel range
Handle feed
Mass

13
7
6.5
3

C

4 - ø5 mm through holes,
countersunk ø84-M4 screw holes, depth 10

47

B

108

58

A

378-730
6.7 kgCode No.
Mass

110
70

110
70

ø111

XY stageT-groove detailed drawing

378-02050x50 mm
34 mm/rev.
3.3 kgNote: Each wheel functions as asingle-axis drive.

Stage illumination unit

ø39
437
452

93.4
212

355

82

( Parfocalizing
distance )

95

24

153

153

1

Standard focusing unit mounting dimensions

Model
Code No.
Travel range
Coarse/fine feed
Loading capacity ofcamera mount *
Mass

10
200

35.2

1

Manual focusing unit S mounting dimensions

FS70-S
378-184-2

FS70Z-S
FS70L-S
FS70L4-S
378-185-2
378-186-2
378-187-2
50 mm
Coarse feed: 3.8 mm/rev., Fine feed: 0.1 mm/rev.

14.5 kg

14.1 kg

14.2 kg

13.9 kg

6.1 kg

6.6 kg

6.4 kg

6.7 kg*Mass of revolver, objective, and eyepiece are excluded.
Note: If the tilting head type with a short focus unit is required, please contact your local Mitutoyo sales office.

15

Code No.
Light source
Rated input
Rated power
consumption
Light guide
Brightness

176-386 ライトガイド長：
L=1500mm
White, 30,000 h service life*1, 6,500K (typ.)*2
AC 100 V - AC 240 V ±10%, 50/60 Hz

Code No.

20 W
Fiber-optic cable (1.5 m length, 5 mm dia.)
Adjustable by volumn*1: T he LED service life may vary depending on the usage environment. This value is not aguarantee of the service life.
*2: Color temperature (given as reference)

110

78

25

60

31.5
79.6

89.5

154

1500

ø7
ø10
ø7

126.5
293.5

451

FS70Z-TH(FS70Z-TH with optional eyepieces, objectives, and revolver.)68 (89.5)(126.5)(157.5)(293.5)

Mitutoyo's FS70-series lineup adopts a tilting head specification that allows
the user to adjust the head to an appropriate eye point according to personal
physical attributes when looking through the microscope eyepiece.

MAX130153 (Mounting
1
surface)
154

25

154

Light source
Light guide
Brightness

227
257

15

97
120

9

10

Fiber-optic illuminator (150 W)

ø10

Tilting head type

Fiber-optic illuminator (LED)

324
154

Objective mounting surface

Fiber-optic cable inlet

Short focus unit type

Manual Focus Unit S can be mounted on the main unit 68mm higher than
the standard focus unit without changing the eye-point position. The ordernumbers in the following table represent the FS70-series main units on which
this focus unit has previously been mounted.
324

Vertical travel
25
25

328
361

114

23 25
76.4

For bright/dark-field revolver

15378-090

The focus point adjust shim set includes
50 μm, 30 μm and 20 μm thickness SUS
rings

100.7

M Plan Apo, M Plan Apo SL,
G Plan Apo, M Plan Apo NIR,
M Plan Apo NUV, M Plan UV

Details

For bright-field revolver

147.7

378-026-1
Microscopes mounted with the bright/dark-fieldmanual revolver or power revolver(WIDE VMU-BDV/H, MF-U, HyperMF-U)

Use

378-089

Stage glass top
185
135

15

Code No.

44

Focus point adjust shim set

This objective adapter allows mounting the bright-field objective on thebright/dark-field revolver (176-211 and 176-210) while maintaining the
focus position (parfocal).

Intermediate image position

378-736
0.8 kgCode No.
Mass

（164）

Optional objective adapter: 378-026-1

Applicableobjective lens

95
200

（65）

ø50
C D

（48）

Applicable models

346
156

95

POWER

132

S T AT US

A B

Code No.

Attaches to the stand to provide contour illumination in conjunction with afiber-optic illuminator (100 W or 150 W).

UR R E T

ø108

POWER T

176-316
15 V/150 W parabolic- type halogen bulb (12BAJ076),
Long-life type500h service life
15 V/150 W parabolic-type halogen bulb (12BAJ075),
High-brightness type50h service life
Fiber-optic cable (1.5 m length, 5 mm dia.)
Adjustable by rotary control

25

Objectives for Bright-field Observation(long working distance)

M Plan Apo /M Plan Apo HR
VMU

WIDE VMU

Features

FS70

MF-U

Hyper MF-U

Specifications> Bright-field observation>W avelength compensation range 436 nm to 656 nm(Designed to fundamental wavelength 587 nm)> Infinity corrected> Long working distance> Plan-Apochromat> High-resolving power type (M Plan Apo HR)(Working distance)
ø34

11.0

440

24

6.6×8.8

300

100

5.0

91

12

3.3×4.4

220

M Plan Apo 5X

378-802-12

0.14

36.5

40

2.0

14

4.8

1.32×1.76

262

M Plan Apo 7.5X

378-807-3

0.21

35.0

26.67

1.3

6.2

3.6

0.88×1.17

240

M Plan Apo 10X

378-803-3

0.28

34.0

20

1.0

3.5

2.4

0.66×0.88

240

M Plan Apo 20X

378-804-3

0.42

20.0

10

0.7

1.6

1.2

0.33×0.44

270

M Plan Apo 50X

378-805-3

0.55

13.0

4

0.5

0.9

0.48

0.13×0.18

290

M Plan Apo 100X
M Plan Apo HR

378-806-3

0.70

6.0

2

0.4

0.6

0.24

0.07×0.09

320
285

M Plan Apo HR 5X *3
M Plan Apo HR 10X *3

378-787-16

0.21

27.0

40

1.3

6.2

4.8

1.32×1.76

378-788-15

0.42

15.0

20

0.7

1.60

2.4

0.66×0.88

455

M Plan Apo HR 50X

378-814-4

0.75

5.2

4

0.4

0.49

0.48

0.13×0.18

400

M Plan Apo HR 100X

378-815-4

0.90

1.3

2

0.3

0.34

0.24

0.07×0.09

410

ø26
ø37

• Every resolution and single objective's depth of focus in the above table is a value determined on the basis of a reference wavelength (λ= 0.55 μm).
*1: When observing a workpiece whose optical reflectance is low, an appropriate polarizer should be used with this lens.
*2: When observing a workpiece whose optical reflectance is low, using this lens with a 1/4 wave plate and polarization unit (No.02ALN370) is recommended.
*3: T hese specifications apply to the objectives in isolation and may not apply when a lens is mounted in the revolver of a microscope, depending on the design of that microscope. In the case where thevertical epi-illumination is provided by the user it is important to balance the various optical parameters so that optimum illumination of the target surface is obtained. Contact your local Mitutoyo sales
Office for information on how this may be achieved.

ø28.2

5.2

95 (Parfocalizing distance)(Working distance)

95 (Parfocalizing distance)

ø28.2

1.3

ø32.2

ø34

2

ø32.2

ø17.8

6

ø29.2

ø34

4.7

ø32.2

ø25

ø24

200

34.0

ø32.2

ø34
ø29.2

ø32.2

ø34

ø34
ø34

26

5

11.0

0.055

M Plan Apo HR 100X

93.7

89

60

15

2

(Working distance)(Working distance)
35

0.025

378-801-12

89.8
595 (Parfocalizing distance)

M Plan Apo 100X

M Plan Apo 7.5X

378-800-12(Working distance)

13

1.5

ø32.2

5

M Plan Apo 1X *1
M Plan Apo 2X *2

M Plan Apo HR 50X

82

58.5

Mass
(g)

95 (Parfocalizing distance)(Working distance)

95 (Parfocalizing distance)

95 (Parfocalizing distance)

7.7

ø32.2

ø29.2

ø34

M Plan Apo 50X
36.5

Real FOV (mm)
ø24 eyepiece 2/3 inch camera

80
595 (Parfocalizing distance)(Working distance)

5(Working distance)

20

1.5

75
5

95 (Parfocalizing distance)

M Plan Apo 5X

5

ø28.2
ø32.2

M Plan Apo HR 10X(Working distance)

ø32.2

ø27.5

ø24.7

ø34
61

95 (Parfocalizing distance)

ø39

M Plan Apo 20X
34

27

68
5

95 (Parfocalizing distance)(Working distance)

1.4

2

ø32.2

ø28.2

ø34
5

95 (Parfocalizing distance)

M Plan Apo 2X

5(Working distance)

34

2

61

84
5

M Plan Apo HR 5X

M Plan Apo 10X

ø41

ø38

ø34

(Working distance)
1/4 Retardation plate
11

W.D. (mm)±DOF (μm)

Code No.

M Plan Apo

Dimensions
M Plan Apo 1X

N.A.

f (mm)
R (μm)(λ= 550 nm) (λ= 550 nm)

Model

5

95 (Parfocalizing distance)

27

Objectives for Bright-field Observation(Super-long working distance)

Objectives for Bright/Dark-field Observation(long working distance)

VMU

WIDE VMU

M Plan Apo SL

Hyper MF-U

> Bright-field observation>W avelength compensation range 436 nm to 656 nm(Designed to fundamental wavelength 587 nm)> Infinity corrected> Super long working distance> Plan-Apochromat

FS70

M Plan Apo SL50X> Wavelength compensation range 436 nm to 656 nm(Designed to fundamental wavelength 587 nm)> Infinity corrected> Long working distance> Plan-Apochromat(Working distance)

1.2

0.33×0.44

240

5M Plan Apo SL50X

378-811-15

0.42

20.5

4

0.7

1.6

0.48

0.13×0.18

280

M Plan Apo SL100X

378-813-3

0.55

13.0

2

0.5

0.9

0.24

0.07×0.09

290

BD Plan Apo5X

61

Note: Mitutoyo is ready to design and manufacture a specificsheet of glass according to a specified glass thickness,material or refractive index, please contact your local
Mitutoyo sales office.
(Working distance): Glass thickness 3.5 mm
2

15.08

ø28.2

ø25

ø32.2

ø34

30.6
ø24

ø34
5

Glass
5

Glass

81.11
96.19

Specifications
Model

ø44

ø32

ø32

ø44

ø44
ø42

ø42

4.7

ø32

1.3

93.7

82
5

95 (Parfocalizing distance)

Model

G Plan Apo 50X(Working distance): Glass thickness 3.5 mm

65.59
96.19

(Working distance)

13

5

95 (Parfocalizing distance)

95 (Parfocalizing distance)

Specifications

G Plan Apo 20X
1.58

BD Plan Apo HR 100X

(Working distance)

8.5

61
5

ø32.2

Dimensions

ø37> Wavelength compensation range 436 nm to 656 nm(Design to fundamental wavelength 587 nm)> Infinity corrected> Long working distance> Plan-Apochromat> Design enables observation through a 3.5 mm coverglass (material: BK7).

5.2

95 (Parfocalizing distance)

ø44

Features > Bright-field observation

34

ø32

Hyper MF-U

BD Plan Apo 50X(Working distance)

ø44

MF-U

4

ø42

FS70

BD Plan Apo 7.5X

5

95 (Parfocalizing distance)

5(Working distance)

89.9

75

95 (Parfocalizing distance)

ø44

WIDE VMU

4.8

ø42

G Plan Apo

BD Plan Apo HR 50X

20

7

95 (Parfocalizing distance)

5(Working distance)

34

61
5

89

95 (Parfocalizing distance)

BD Plan Apo 20X(Working distance)

ø37

Objectives for Bright-field Observation(with cover-glass thickness compensation)
VMU

4

ø44

• Every resolution and single objective's depth of focus in the above table is a value determined on the basis of a reference wavelength (λ= 0.55 μm).

61
595 (Parfocalizing distance)

ø40

3.5

ø42

1.0

ø42

10

ø42

30.5

ø31.5

0.28

6

ø40

378-810-3(Working distance)

ø40

M Plan Apo SL
M Plan Apo SL20X

10

ø42

W.D. (mm)

34

ø40

N.A.

BD Plan Apo 100X

(Working distance)

ø37

Mass
(g)

Code No.

4

ø44

ø44

34

ø40

Real FOV (mm)
ø24 eyepiece 2/3 inch camera±DOF (μm)(Working distance)

ø37

f (mm)
R (μm)(λ= 550 nm) (λ= 550 nm)

4

ø40

ø32.2

95 (Parfocalizing distance)

Specifications
Model

BD Plan Apo 10X

BD Plan Apo 2X82
5

95 (Parfocalizing distance)

Dimensions

ø42

74.5
5

95 (Parfocalizing distance)

13

ø22

ø23.8

ø34

1.4

ø32.2

ø34

20.5

ø32.2

ø24

ø24.8

ø34

30.5

64.5
5

M Plan Apo SL100X(Working distance)

ø23.9(Working distance)

1.5

Hyper MF-U

Features > Bright/dark-field observation

Dimensions

M Plan Apo SL20X

MF-U

ø40

MF-U

ø40

Features

FS70

ø40

WIDE VMUBD Plan Apo

f (mm)
R (μm)(λ= 550 nm) (λ= 550 nm)±DOF (μm)

Real FOV (mm)
ø24 eyepiece 2/3 inch camera

Mass
(g)

Code No.

N.A.

W.D. (mm)

G Plan Apo
G Plan Apo 20X (t3.5)

378-847

0.28

29.42

10

1.0

3.5

1.2

0.33×0.44

270

G Plan Apo 50X (t3.5)

378-848-3

0.50

13.89

4

0.6

1.1

0.48

0.13×0.18

320

W.D. (mm)f (mm)
R (μm)(λ= 550 nm) (λ= 550 nm)±DOF (μm)

Real FOV (mm)

Mass
(g)

Code No.

N.A.

BD Plan Apo
BD Plan Apo 2X *378-831-13

0.055

34.0

100

5.0

91

12

3.3×4.4

340

BD Plan Apo 5X

378-832-12

0.14

34.0

40

2.0

14

4.8

1.32×1.76382

ø24 eyepiece 2/3 inch camera

BD Plan Apo 7.5X

378-830-7

0.21

34.0

26.67

1.3

6.2

3.6

0.88×1.17

350

BD Plan Apo 10X

378-833-7

0.28

34.0

20

1.0

3.5

2.4

0.66×0.88

350

BD Plan Apo 20X

378-834-7

0.42

20.0

10

0.7

1.6

1.2

0.33×0.44

400

BD Plan Apo 50X

378-835-7

0.55

13.0

4

0.5

0.9

0.48

0.13×0.18

440

BD Plan Apo 100X

378-836-7

0.70

6.0

2

0.4

0.6

0.24

0.07×0.09

460• Every resolution and single objective's depth of focus in the above table is a value determined on the basis of a reference wavelength (λ= 0.55 μm).
* It is recommended to be used together with the 1/4 wavelength plate B (02ALN380) and appropriate polarizer for the microscope used (Working distance will be shortened 4 mm).

• Every resolution and single objective's depth of focus in the above table is a value determined on the basis of a reference wavelength (λ= 0.55 μm).

28

29

Near-infrared radiation range objectives for
Bright-field observation

Near-infrared radiation range objectives for Bright-fieldobservation (with cover-glass thickness compensation)

M Plan Apo NIR /M Plan Apo NIR HR /M Plan Apo NIR B
WIDE VMU

VMU

WIDE VMU

Features > Bright-field observation/Near-infrared observation/Laser

machining> Wavelength compensation range 480 nm to 1800 nm> Infinity corrected> Long working distance> Plan-Apochromat> Design enables observation through a 3.5 mm or 1.1 mm
cover glass (material: BK7).

FS70

Features > Bright-field observation/Near-infrared observation/Laser

machining> Wavelength compensation range 480 nm to 1800 nm (MPlan Apo NIR B: 420 nm to 1064 nm)> Infinity corrected> Long working distance> Plan-Apochromat> High-resolving power typ (M Plan Apo NIR HR)> Ultra-long working distance and High spectral transmission
factor (M Plan Apo NIR B)

Note: Mitutoyo is ready to design and manufacture a specific sheet of glass
according to a specified glass thickness, material or refractive index,
please contact your local Mitutoyo sales office.

> High-resolving power typ (LCD Plan Apo NIR HR)

Dimensions

10

25.5

5

5

5

ø39

ø34

ø37

ø32.2

10.11

78.04
95.24

5

85.13
95.24

5

ø39

LCD Plan Apo NIR 100X (t0.7)
12.3

ø34

ø37

(Working distance)

ø32.2

85
5

95 (Parfocalizing distance)

Specifications

M Plan Apo NIR B
M Plan Apo NIR B 20X
M Plan Apo NIR B 50X

75
95.24

10

ø32.2
75

M Plan Apo NIR HR
M Plan Apo NIR HR 20X
M Plan Apo NIR HR 50X
M Plan Apo NIR HR 100X

(Working distance)(Working distance)

95 (Parfocalizing distance)

M Plan Apo NIR
M Plan Apo NIR 5X
M Plan Apo NIR 10X
M Plan Apo NIR 20X
M Plan Apo NIR 50X
M Plan Apo NIR 100X

17.2

ø32.2

M Plan Apo NIR HR 100X

20

Model

ø32.2

ø34

95 (Parfocalizing distance)

LCD Plan Apo NIR HR 100X (t0.7)(Working distance)

20.24

85.4
95.24

5

LCD Plan Apo NIR 50X (t0.7)(Working distance)

69.5

95 (Parfocalizing distance)

77.97
95.37

5

LCD Plan Apo NIR 20X (t0.7)
ø37

ø37
85

95 (Parfocalizing distance)(Working distance)

ø34(Working distance)

9.84

ø37

12

(Working distance)

17.4

ø32.2

M Plan Apo NIR B 50X

ø32.2
5

20.35

ø34

(Working distance)

M Plan Apo NIR 20X

5

ø37

M Plan Apo NIR HR 50X

83

64

95 (Parfocalizing distance)

5

95 (Parfocalizing distance)(Working distance)

ø32.2

ø34

31

5

LCD Plan Apo NIR HR 50X (t0.7)(Working distance)

75.02
95.37

69.5

95 (Parfocalizing distance)

LCD Plan Apo NIR 50X (t1.1)(Working distance)

25.5

ø37
5

M Plan Apo NIR 100X

(Working distance)

ø34

83

95 (Parfocalizing distance)

ø39

M Plan Apo NIR 10X

5

ø39

78
5

LCD Plan Apo NIR 20X(t1.1)(Working distance)

12

ø32.2

ø32.2

ø23

ø23.8

57.5

95 (Parfocalizing distance)

M Plan Apo NIR B 20X(Working distance)

17

ø34

37.5

ø34

M Plan Apo NIR HR 20X(Working distance)

ø37

M Plan Apo NIR 50X(Working distance)

ø37

M Plan Apo NIR 5X

ø39

Dimensions

5

FS70

ø34

VMU

LCD Plan Apo NIR /LCD Plan Apo NIR HR

82.94
95.24

5

Code No.
378-822-5
378-823-15
378-824-16
378-825-17
378-826-15
378-854378-863-5
378-864-15
378-867-5
378-868-5

N.A.
0.14
0.26
0.40
0.42
0.50
0.60
0.65
0.70
0.40
0.42

W.D. (mm)
37.5
31.0
20.0
17.0
12.0
12.0
10.0
10.0
25.5
25.5

f (mm)
R (μm)(λ= 550 nm) (λ= 550 nm)
40
20
10
4
2
10
4
2
10
4

2.0
1.1
0.7
0.7
0.6
0.46
0.4
0.4
0.7
0.7

±DOF (μm)
14.0
4.1
1.7
1.6
1.1
0.8
0.7
0.6
1.7
1.6

Real FOV (mm)
ø24 eyepiece
2/3 inch camera
4.8
2.4
1.2
0.48
0.24
1.2
0.48
0.24
1.2
0.48

1.32×1.76
0.66×0.88
0.33×0.44
0.13×0.18
0.07×0.09
0.33×0.44
0.13×0.18
0.07×0.09
0.33×0.44
0.13×0.18

Mass
(g)

Specifications
Model

220
250
300
350
335
470
450
490
350
375

Code No.

N.A.

W.D. (mm)f (mm)
R (μm)(λ= 550 nm) (λ= 550 nm)±DOF (μm)

Real FOV (mm)
ø24 eyepiece 2/3 inch camera

Mass
(g)

LCD Plan Apo NIR
LCD Plan Apo NIR 20X (t1.1)

378-827-16

0.40

19.98

10

0.7

1.7

1.2

0.33×0.44

305

LCD Plan Apo NIR 20X (t0.7)

378-821-16

0.40

20.00

10

0.7

1.7

1.2

0.33×0.44

305

LCD Plan Apo NIR 50X (t1.1)

378-828-16

0.42

17.13

4

0.7

1.6

0.48

0.13×0.18

320

LCD Plan Apo NIR 50X (t0.7)

378-829-16

0.42

17.26

4

0.7

1.6

0.48

0.13×0.18

320

LCD Plan Apo NIR 100X (t0.7)

378-754-15

0.50

12.06

2

0.6

1.1

0.24

0.07×0.09

335

LCD Plan Apo NIR HR
LCD Plan Apo NIR HR 50X (t0.7)

378-869-5

0.65

9.6

4

0.4

0.7

0.48

0.13×0.18

450

LCD Plan Apo NIR HR 100X (t0.7)

378-870-15

0.70

9.87

2

0.4

0.7

0.24

0.07×0.09

490• Every resolution and single objective's depth of focus in the above table is a value determined on the basis of a reference wavelength (λ= 0.55 μm).

• Every resolution and single objective's depth of focus in the above table is a value determined on the basis of a reference wavelength (λ= 0.55 μm).
Note: If the wavelength used is 1100 nm or longer, the focal point may deviate slightly from that in visible radiation.

30

31

Near-ultraviolet radiation range
objectives for Bright-field observation

Near-ultraviolet radiation range objectives for Bright-fieldobservation (with cover-glass thickness compensation)

VMU

VMU

M Plan Apo NUV /M Plan Apo NUV HRLCD Plan Apo NUV /LCD Plan Apo NUV HR

FS70

Features > Bright-field observation/Near-ultraviolet observation/

FS70

Features > Bright-field observation/Near-ultraviolet observation/Laser
machining> Wavelength compensation range 355 nm to 620 nm> Infinity corrected> Long working distance> Plan-Apochromat> Design enables observation through a 3.5 mm cover glass(material: BK7).

Laser machining> Wavelength compensation range 355 nm to 620 nm> Infinity corrected> Long working distance> Plan-Apochromat> High-resolving power typ (M Plan Apo NUV HR)

Note: Mitutoyo is ready to design and manufacture a specific sheet of glass
according to a specified glass thickness, material or refractive index,
please contact your local Mitutoyo sales office.

> High-resolving power typ (LCD Plan Apo NUV HR)

Dimensions

Dimensions

5

M Plan Apo NUV 20X

ø37

ø32.2

85
95.24 (Parfocalizing distance)

14.9/15

ø32.2

ø32.2

ø34

ø34

95 (Parfocalizing distance)

580.47/ 80.24
95.37/95.24 (Parfocalizing distance)

Specifications

Specifications
f (mm)
R (μm)(λ= 550 nm) (λ= 550 nm)±DOF (μm)

Real FOV (mm)

Mass
(g)

Code No.

N.A.

W.D. (mm)

M Plan Apo NUVM Plan Apo NUV 10X

378-809-5

0.28

30.5

20

1

3.5

2.4

0.66×0.88

255

LCD Plan Apo NUVLCD Plan Apo NUV 20X (t0.7)

M Plan Apo NUV 20X

378-817-8

0.42

17.0

10

0.7

1.6

1.2

0.33×0.44

340

LCD Plan Apo NUV 50X (t0.7)

M Plan Apo NUV 50X

378-818-8

0.44

15.0

4

0.6

1.4

0.48

0.13×0.18

350

M Plan Apo NUV 100X

378-819-15

0.50

11.0

2

0.6

1.1

0.24

0.07×0.09

380

ø24 eyepiece 2/3 inch camera

M Plan Apo NUV HR
M Plan Apo NUV HR 50X

5(Working distance)

84
5

10.24

LCD Plan Apo NUV 50X (t0.7)

11

ø32.2
78

Model

78.04
95.24 (Parfocalizing distance)

5(Working distance)

95 (Parfocalizing distance)(Working distance)

17.2

ø37

95 (Parfocalizing distance)

M Plan Apo NUV 100X
17

ø34

5

95 (Parfocalizing distance)(Working distance)

5

ø39

85

80

95 (Parfocalizing distance)

LCD Plan Apo NUV HR 50X (t0.7)(Working distance)

10

ø32.2

ø34
ø25.2

64.5
5

(Working distance)

15

ø32.2

ø24.8

ø34

30.5

LCD Plan Apo NUV 20X (t0.7)

M Plan Apo NUV HR 50X(Working distance)

ø39

M Plan Apo NUV 50X(Working distance)

ø34

M Plan Apo NUV 10X

Model

f (mm)
R (μm)(λ= 550 nm) (λ= 550 nm)±DOF (μm)

Real FOV (mm)

Mass
(g)

N.A.

W.D. (mm)378-890-8

0.42

16.96

10

0.7

1.6

1.2

0.33×0.44340378-820-8

0.44

14.76

4

0.6

1.4

0.48

0.13×0.18350378-891-6

0.65

9.76

4

0.4

0.7

0.48

0.13×0.18

500

Code No.

ø24 eyepiece 2/3 inch camera

LCD Plan Apo NUV HRLCD Plan Apo NUV HR 50X (t0.7)• Every resolution and single objective's depth of focus in the above table is a value determined on the basis of a reference wavelength (λ= 0.55 μm).

378-888-6

0.65

10.0

4

0.42

0.65

0.48

0.13×0.18

500• Every resolution and single objective's depth of focus in the above table is a value determined on the basis of a reference wavelength (λ= 0.55 μm).

32

33

Ultraviolet radiation range objectives for
Bright-field observation

Ultraviolet radiation range objectives for Bright-field observation(with cover-glass thickness compensation)

VMU

VMU

M Plan UVLCD Plan UV

FS70

Features > Bright-field observation/Ultraviolet observation/Laser ma-

Features > Bright-field observation/Ultraviolet observation/Laser machining

chining> Wavelength compensation 266 nm and 550 nm> Infinity corrected> Long working distance> Plan> Wavelength compensation 266 nm and 550 nm> Infinity corrected> Long working distance> Plan> Design enables observation through a 3.5 mm cover glass (material: sio2).

Note: Mitutoyo is ready to design and manufacture a specific sheet of glass according toa specified glass thickness, material or refractive index, please contact your local
Mitutoyo sales office.

12

5

15

M Plan UV 80X(Working distance)

ø34(Working distance)

10

Model

85
5

95 (Parfocalizing distance)

95 (Parfocalizing distance)

Specifications
Code No.

N.A.

W.D. (mm)15.22

f (mm)

f266

f550

R (μm)(λ= 550 nm)±DOF (μm)(Working distance)
12.62

80
95.22 (Parfocalizing distance)

82.6
95.22 (Parfocalizing distance)

5

Specifications

ø22.7
ø32.2

80
5

5

95 (Parfocalizing distance)

ø32.2

M Plan UV 20X
ø34

95 (Parfocalizing distance)

LCD Plan UV 50X(Working distance)

ø32.2

83

75
5

LCD Plan UV 20X

ø32.2(Working distance)

ø34

M Plan UV 50X

ø34

20

ø32.2

(Working distance)

ø32.2

M Plan UV 10X

ø34

Dimensions
ø34

Dimensions

Model

FS70

Real FOV (mm)
ø24 eyepiece 2/3 inch camera

Mass
(g)

M Plan UVM Plan UV 10X

378-844-15

0.25

20.0

20

20.3

1.1

4.4

2.4

0.66×0.88

310

M Plan UV 20X

378-837-8

0.37

15.0

10

10.4

0.7

2.0

1.2

0.33×0.44

370

M Plan UV 50X

378-838-8

0.41

12.0

4

4.2

0.7

1.6

0.48

0.13×0.18

400

M Plan UV 80X

378-839-5

0.55

10.0

2.5

2.9

0.5

0.9

0.3

0.08×0.11

380

Code No.

N.A.

W.D. (mm)

LCD Plan UVLCD Plan UV 20X (t0.7)

378-892-8

0.37

LCD Plan UV 50X (t0.7)

378-893-8

0.41

f (mm)

R (μm)(λ= 550 nm)

f 266

f 550

14.98

10

10.4

0.7

12.38

4

4.2

0.7

Real FOV (mm)
ø24 eyepiece

2/3 inch camera

Mass
(g)

2.0

1.2

0.33×0.44

370

1.6

0.48

0.13×0.18

400±DOF (μm)• When projecting a mask image on a specimen by using a YAG laser system mounted on a Mitutoyo microscope unit, the mask image will be scaled by the factor f/200 times (f= 200 mm, Mitutoyo tube lens).
Since the focal length (f) in ultraviolet radiation (λ = 266 nm) is slightly smaller than that in visible radiation (λ = 550 nm) as above, the working area in ultraviolet radiation also becomes slightly smaller than themask image in visible radiation.
• Every resolution and single objective's depth of focus in the above table is a value determined on the basis of a reference wavelength (λ= 0.55 μm).

• When projecting a mask image on a specimen by using a YAG laser system mounted on a Mitutoyo microscope unit, the mask image will be scaled by the factor f/200 times (f= 200 mm, Mitutoyo tube lens).
Since the focal length (f) in ultraviolet radiation (λ = 266 nm) is slightly smaller than that in visible radiation (λ = 550 nm) as above, the working area in ultraviolet radiation also becomes slightly smaller thanthe mask image in visible radiation.
• Every resolution and single objective's depth of focus in the above table is a value determined on the basis of a reference wavelength (λ= 0.55 μm).

3435

Tube Lens

Objectives for Measuring Microscopes

MTML(image-object distance: 280 mm, parfocalizing distance :110 mm)> Bright-field observation> Long working distance> Telecentric for lenses lower than 10X magnification

176.4
Workpiece’s side
focal position

49

61

49

10

110

(Working distance)

10(Parfocalizing distance)

Mass (g)
43
42
45
30
30

Note: A distance of 76.5mm in 970208 and 970209 drawings is for an image field of ø30 (without vignetting). For an image field of ø24 or ø11 (the latter is the image field of a 2/3-inch camera), use the formula(1) and (2) below to calculate the distance.

Reference: Placement of Objective and Tube Lens
VMU and WIDE VMU and FS70 employs an infinity-corrected optical system in which the image is created by an objective lens and an imaging(tube) lens. Mitutoyo’s long working-distance objective lenses are designed to cover a field of view of up to ø30 mm (when the tube lens 970208
or 970209 is placed) and up to ø24 mm (when the tube lens 378-008, 378-009 or 378-010 is placed) at the specified distance from theobjective. However, use the following formula to calculate the approximate distance, when a distance other than that as specified is requiredin order to insert your own optical system or other optical elements:= (ø2 – ø1) • f2 / ø [mm]························(1)ø1 = 2 • f • N.A. [mm]·····························(2)ø1 : Objective exit pupil diameter (mm)
ø2 : Effective diameter of tube lens (mm)f2 : Focal length of tube lens (mm)
ø : Image field diameter (mm)øImage field

ML 3X(Working distance)

14.5(Parfocalizing distance)

ML 10X

110(Working distance)(Parfocalizing distance)

59
10

90
110

20

ø33

ø39

ø33

ML 100X

104
14.1(Parfocalizing distance)

6

110(Parfocalizing distance)

ML 50X

77

33
10

61
110

ø30
ø14.5

Dimensions (mm)
ø40×32.5
ø40×32.0
ø34×27.5
ø35×32.0
ø35×30.6

ø28

Effective lens dia. (mm)
ø24.0
ø18.0
ø11.2
ø22.0
ø23.0

ø25

Image field (mm)
ø30
ø30
ø24
ø24
ø24

ø30

Magnification (tube lens)
1X
2X
1X
1X
1X

ø18

Focal length (mm)
200
400
200
200
200

ML 20X

51
110(Working distance)

ø33

ø30
ø16.5

Workpiece surface

Workpiece’s side
focal position

ML 5X

ø39

ML 1X
226.5

Objective mounting
position (see below)

ø39

Main unit

ø35

ø25
ø28

176.4

Mounting ring3

Dimensions

3.5
23.6

3.5

−0.009ø33g 6 −0.025

1343Workpiece surface

Workpiece’s side
focal position

M3 2×0.5

Mounting ring
3.5
3.5

25
225.8

Objective mounting
position (see below)

95 (Parfocalizing distance)

ø35

ø35

ø30

Workpiece’s side
focal position

Intermediate
image position

Main unit

170

M3 2×0.5−0.009ø33g 6 −0.025

134
Workpiece surface

Workpiece surface

Specifications
Code No.
970208970209378-010378-008378-009ø35

243.31

Objective mounting
position (see below)

ø21

95 (Parfocalizing distance)

Workpiece surface

Workpiece’s side
focal position

26 threads 36
Refer to JIS B7141.

240.2
76.5

166.4
Objective mounting
position (see below)

Intermediate
image position

ø34

Half-reflecting mirror(for epi-illumination)

704.2

4.5

ø30 -0.01-0.05

95 (Parfocalizing distance)

95 (Parfocalizing distance)

76.5

ø30 -0.01-0.05

Features > Finite-correction

MT-L4

Intermediate
image position

2.5

28

29.5

240.2

3-2
throu.4 mmg(evenly h holes
Intermediate separated at 12
0°)
image position

26 threads 36
Refer to JIS B7141.

ø36

3-2
throu.4 mmg(evenly h holes
Intermediate separated at 12
0°)
image position

Half-reflecting mirror(for epi-illumination)

MT-L

15 12.5 ±1.5

16.4
ø36

MT-40

Hyper MF

ø30
ø17

MT-2
16.4

MT-1

95 (Parfocalizing distance)

Dimensions

MF

MT-1, 2, 40: Visible wavelength range (435.8 – 656.3 nm)
MT-L: Near-ultraviolet (355 nm) to near-infrared (1800 nm)
MT-L4: Ultraviolet (266 nm) to visible (620 nm).

ø31.5

Aberration correction range

97
14.7

13

110

(Parfocalizing distance)(Parfocalizing distance)

Note: The parfocalizing distance is a nominal value.

Specifications
Model

Code No.

N.A.

W.D. (mm)R (μm)(λ= 550 nm)±DOF (μm)

ML 1X
ML 3X
ML 5X
ML 10X
ML 20X
ML 50X
ML 100X

375-036-2
375-037-1
375-034-1
375-039375-051
375-052375-053

0.03
0.09
0.13
0.21
0.42
0.55
0.70

61.0
77.0
61.0
51.0
20.0
13.0
6.0

9.2
3.06
2.12
1.31
0.65
0.5
0.4

306
34
16.3
6.2
1.6
0.9
0.6

Real FOV (mm)
ø24 eyepiece
1/2 inch camera
24
4.8×6.48
1.6×2.1
4.8
0.96×1.28
2.4
0.48×0.64
1.2
0.24×0.32
0.48
0.10×0.13
0.24
0.05×0.06

Mass
(g)
80
55
60
95
310
350
380

• Every resolution and single objective's depth of focus in the above table is a value determined on the basis of a reference wavelength (λ= 0.55 μm).

Example: What is the distance ( ), when using M Plan Apo 10X* and tube lens** (970208) to cover
an image field of ø24?
*f = 20 mm, N.A.= 0.28 (Refer to page 16.) **ø 2 = 24 mm, f 2 = 200 mm (Refer to the above chart.)

From formula (2): ø1 =2x20x0.28=11.2 (mm)Tube lensø2

From formula (1) : = (24−11.2) x 200/24=106.6 (mm)ø1

Therefore a distance ( ) up to 106 mm can cover an image field of ø24 without shading.
In other words a distance ( ) smaller than the specification does not affect optical performance.
Contact Mitutoyo for detailed information.

36

Objectivef1

NA
Workpiece surface

37

Objectives for Centering microscopes

Wide Field of View Eyepieces and Reticles

CF

WF

CF

MF

MF-U

Hyper MF

Hyper MF-U

FS70

Features > Eyepiece for wide field of view

Features > Finite-correction> Adopt an outside focus type of optical system> Various reticles can be attached according to usage purposes(image-object distance: 280 mm, parfocalizing distance: 110 mm)> Bright-field observation> Long working distanceDimensions

36.3
5

32.2
5

66

110
(Parfocalizing distance)

8

110(Parfocalizing distance)

ø38

ø32

ø38

ø30

WF 20×/12

17

20X eyepieceModel378-866378-858

61

Wide field of view eyepiece WF10X/24
Wide field of view eyepiece WF20X/12

Magnification

Field number

Visibility adjustment

Eye point

Reticle

Mass
(g)

10X
20X

24
12

-10D to +5D-8D to +5DHigh eye point
NormalAvailable
Available

150
55

Note: The above lenses are provided as a set of 2.

(Working distance)

110(Parfocalizing distance)

14.6

17

Intermediate image
position

Specifications

ø28

ø25

ø17

ø30

ø22

ø25

49

(Working distance)
12

10

Eye point

10X eyepiece

Code No. (2pcs.)

92

WF 10×/24

43.9

44

(Working distance)

CF 5X

18

ø41.4

ø25

77.8

(Working distance)

110(Parfocalizing distance)

CF 2X
ø30

ø30

ø25

73.7

(Working distance)

Intermediate image
position

10

Eye point

CF 10X

ø30

ø25

CF 3X

ø26

ø30

CF 1X

WF 20X/12

ø30

WF 10X/ 24

Dimensions

110(Parfocalizing distance)

10

Note: The parfocalizing distance is a nominal value.

ReticlesSpecifications
Real FOV (mm)
ø24 eyepiece
1/2 inch camera

Mass
(g)

Model

Code No.

N.A.

W.D. (mm)R (μm)(λ= 550 nm)±DOF (μm)

CF 1X

375-031

0.03

73.7

9.2

306

24

4.8×6.4

45

CF 2X

375-032

0.06

92.0

4.6

76

12

2.4×3.2

35

CF 3X

375-033

0.07

77.8

3.9

56

8

1.6×2.1

35

CF 5X

375-034-1

0.13

61.0

2.12

16.3

4.8

0.96×1.28

60

CF 10X375-035

0.18

44.0

1.5

8

2.4

0.48×0.64

100• Every resolution and single objective's depth of focus in the above table is a value determined on the basis of a reference wavelength (λ= 0.55 μm).

Features > Simple dimensional measurement is possible by inserting into the eyepiece (intermediate image position): No.378-866, 378-857, and 378-858> Reticle line width 10 μm...No.516576 only 7 μm
> Outer diameter ø25 mm, thickness 1 mm

Dimensions
No.516848

No.516576

No.516578

No.516577

No.516849

No.516850

0 10 20 30 40 50 60 70 80 90 100

Specifications
Code No.
Remarks

38

516848
Solid crosshairs

51657651657851657751684951685090° and 60° broken
crosshairs

Concentric circles(ø1.2 - 18 mm)with solid crosshairs

Solid crosshairs
with scale graduated
0.1 mm/20 mm

10 mm scalewith 0.1 mm graduations

5 mm scalewith 0.05 mm graduations

39

1. Scope These specifications are applied to the threads of Mitutoyo microscope objectives.
2. The thread forms and dimensions are specified as follows conforming to JIS B-7141-1994.

Each VMU and FS70 series of Mitutoyo microscope units uses a built-in laser [mainly, Nd-YAG laser fundamental wave (1064 nm), second harmonic(532 nm), third harmonic (355 nm) and fourth harmonic (266 nm)] to allow laser machining. In laser machining with a laser-equipped microscope
unit and a microscope objective, high-power laser irradiation is not allowed for the purpose of microfabrication.
IMPORTANT: Review laser safety precautions prior to use.

Nominal Dimensions
Nominalthreaddiameter

Pitch

36

0.706

26

P

External thread
Thread peak
Root
OD
Pitch
& valley
diameter (d2) diameter (d1)(d)
curvature
Internal thread
radius
Pitch
ID
Root
R
diameter (D) diameter (D2)
(D1)
0.097
26.00025.54825.096

Number of
threads(per 25.4 mm)
n

Pitch

40

36

0.706

P

Thread peak
& valleycurvatureradiusR
0.097(Upper 1tol.)× 2

VMU Series

D 1 (Max. limit)(Upper tol.)× 21

D 1 (Min. limit)(Lower tol.)× 21

D1(Upper tol.)× 21

Permissible Limits of Size and Dimensional Tolerance

Unit: mmNominalthreaddiameterStandard thread

Unit: mm

Unit: mm

External thread
Internal thread
OD
Pitch
Root
Root
Pitch
ID
(d) diameter (d2) diameter (d1) diameter (D) diameter (D2) (D1)
39.50239.05040.07639.62439.230Permissible Max. limit 39.896
limitsMin. limit 39.820
39.42638.97440.00039.54839.154External thread
Root
Pitch
diameter (d2) diameter (d1)Internal thread
Pitch
ID
Root
diameter (D) diameter (D2)
(D1)
40.00039.54839.096

Applicable dimensions

OD
(d)

Upper
Dimensional tolerance −0.104
tolerance Lower
tolerance −0.180−0.046−0.046+0.076+0.076+0.134−0.122−0.12200+0.058Reference: Transmission of Mitutoyo Objectives
Mitutoyo’s long working-distance objectives are grouped by working wavelength range: ultraviolet, near-ultraviolet, visible, and near-infrared. The M PlanUV series (for ultraviolet), M Plan Apo NUV series (for near-ultraviolet), and M Plan Apo NIR series (for near-infrared) are designed especially for YAG laser
working applications in cutting thin films. Each series is designed for optimal spectral transmission factor within its respective wavelength range.
M (BD) Plan Apo series: Wavelength range 436 nm to 656 nm

355

1064

532

355

266

0.099

0.075

0.025

0.11

0.080

0.035

0.015

0.22

0.18

0.07

0.2

0.19

0.05

0.05

FS70 Series
FS70L

Applicable model
Wavelength used (nm)
Pulse laser
Upper input limit (J/cm2)
Pulse width (10 ns)
Upper limit to CW laser input(kW/cm2)

FS70L4

1064

532

355

532

266

0.090

0.075

0.018

0.075

0.015

0.23

0.18

0.06

0.2

0.05

Upper Limit to Objective Laser Input
Determine the upper limit value of laser input under the following conditions if the laser radiation directly enters the objective.
Laser radiation incident on the optical system shall be axial.

VMU Series
Applicable objective
Wavelength used (nm)
Pulse laser
Upper input limit (J/cm2)
Pulse width (10 ns)
Upper limit to CW laser input(kW/cm2)

NIR series

NIR series
NUV series
UV series

NUV series

UV series

1064

532

355

266

0.2

0.1

0.05

0.04

0.5

0.25

0.16

0.12

Example: If the pulse width decreases to 1/4 of the initial width, reduce the energy density to approximately 1/2.
		
Therefore when using a laser with a wavelength of 1064 nm and a pulse width of 2.5 ns, the upper limiting value of input will be 0.1 J/cm2.

80
60
40
20
900
1200
Wavelength (nm)

1500

1800

Spectral transmission factor (%)

Spectral transmission factor (%)

532

M Plan Apo NUV series: Wavelength range 355 nm to 620 nm

M Plan Apo NIR 100x
M Plan Apo SL 100x
M Plan Apo NUV 100x

600

VMU-L4B

1064

Note: If the pulse width of the laser is shortened, reduce the irradiation energy density by the square root of the ratio of the new pulse width to the initial pulse width.

Spectral transmission characteristics of 100X objective

0300

Wavelength used (nm)
Pulse laser
Upper input limit (J/cm2)
Pulse width (10 ns)
Upper limit to CW laser input(kW/cm2)

M Plan Apo NIR series: Wavelength range 480 nm to 1800 nm
M Plan UV series: Optimized for wavelengths of 266 nm and 550 nm
100

VMU-LB

Applicable model

External thread
Internal thread
Applicable dimensions OD
Pitch
Root
Root
Pitch
ID
(d) diameter (d2) diameter (d1) diameter (D) diameter (D2) (D1)
25.50225.05026.07625.62425.230Permissible Max. limit 25.896
limitsMin. limit 25.820
25.42624.97426.00025.54825.154Upper−0.046+0.076+0.076 +0.134
Dimensional tolerance −0.104 −0.046
tolerance Lower−0.12200+0.058tolerance −0.180 −0.122

Bright/Dark-field Objectives
Nominal Dimensions

Determine the upper limit value of laser input under the following conditions. Laser radiation incident on the optical system shall be axial and nonpolarized.

Permissible Limits of Size and Dimensional Tolerance

Unit: mm

Number of
threads(per 25.4 mm)nLaser Input Conditions of Laser-equipped Microscope Unit

d1

Bright-field Objectives
Measuring Microscope/Centering Microscope Objectives

External
threadPermissible range

D 2 (Max. limit)
D 2 (Min. limit)(Lower tol.)× 0(Upper 1tol.)× 2(Upper 1tol.)× 2(Lower 1tol.)× 2(Lower 1tol.)× 2

d 2 (Max. limit)d (Min. limit)d (Max. limit)d2
d 2 (Min. limit)dd 1 or D 1

d 2 or D 2

R
H
6

H
2

External threadd or D

H
6

55°
27.5°

H1

27.5°

D (Max. limit)
D = D (Min. limit)

Permissible range
Standard thread

Internal thread

H
2

H

External threadd 1 (Min. limit)P

d 1 (Max. limit)(Lower tol.)× 21

Standard thread(Lower tol.)× 0

Commentary: Laser Operating Method and Precautions(Upper tol.)× 21

Reference: Specifications of Objective Threads

100

Spectral transmission characteristics of M Plan UV 80X

80
60
40
20
0
200 266 300

400

500 550 600
Wavelength (nm)

700

800

N.A.: Numerical aperture W.D.: Working distance f: Focal length R: Resolving power DOF: Depth of field FOV: Real field of view

40

41

Glossary
1. N.A. (Numerical Aperture)

N.A. determines resolving power, depth of field, and luminosity of theimage. The larger the N.A. the higher is the resolving power and smaller isthe depth of field.
N.A. = n • Sinθn is the index of refraction of the medium in which the lens is working.
n =1.0 for air.
θ is the half-angle of the maximum cone of light that can enter or exit
the lens.
Objectiveθ

Air (n=1)
Workpiece

Distance between a principal point and a focal point. f1 is the focal lengthof an objective, f2 is the focal length of a tube lens. Magnification isdetermined by the ratio of the focal length of the tube lens to that of theobjective. (For an infinity-corrected optical system.)
Magnification of objective =(E.g.) 1X =200 (mm)
200 (mm)

Focal length of tube lens
Focal length of objective(E.g.) 10X =

200 (mm)
20 (mm)8. Field number and FOV (Real Field of View)

Stage glass

The field number of an eyepiece is determined by the field stop diameterof the eyepiece and it is expressed in mm.

2. R (Resolving Power)

Minimum distance between points or lines that are just distinguishable asseparate entities.
Resolving power is determined by N.A. and wavelength λ.
R (µm) =7. F (Focal Length)

λ2 · N.A.

FOV is the area of specimen observable and is determined by the field numberof the eyepiece and magnification of the objective.
FOV (mm) =Field number of eyepiece
Magnification of objective(E.g. Using an eyepiece of field number 24)

3. W.D. (Working distance)

Distance between the surface of the specimen and the front face of theobjective when in focus.

Bright-field illumination directly lights the specimen with a solid coneof rays and is the simplest method available. Dark-field illumination
uses a hollow cone of rays formed by an opaque stop at the center ofthe condenser large enough to prevent direct light from entering theobjective. The specimen is placed at the concentration of the light cone,
and is seen with light scattered or diffracted by it, therefore scratches
and dents on the specimen surface are illuminated while the rest
remains dark.

11. Apochromatic objective and achromatic objective

An apochromatic objective is corrected for chromatic aberration at thered, green and blue wavelengths. An achromatic objective is corrected
for chromatic aberration at the red and blue wavelengths only.

12. Koehler illumination

Köhler illumination overcomes the disadvantages of other schemes bycausing parallel rays to light the specimen so that, because they will not
be in focus, the image of the specimen will not include an image of thelight source.
Imaging system

24
FOV for 1X objective == ø24 (mm)1
FOV for 10X objective =10. Bright-field illumination and dark-field illumination

Aperture
Relay lens Field stop diaphragm Condenser lens Fiber-optic cable

Area of camera image element (VxH)
Area of specimen=
observable on TV monitor
Magnification of objective

Working distance

5. Infinity-corrected optical system

An optical system in which the image is formed by an objective anda tube lens with an 'Infinity Space' between them, into which opticalaccessories can be inserted.
Infinity space

Objective

Imaging (tube) lensObjective focal point(object plane)

Imaging lens focal point(image plane)

f1

f2

Magnification = f2 /f1

An optical system in which the image is formed only by an objective lens.
Objective
Image point

L1

42

L2

9. DOF (Depth of Field)

Vertical distance in the specimen, measured from above and below theexact plane of focus, which still yields an acceptable image.
The larger the N.A., the smaller the depth of field.
Eyepiece observation (Formula due to Berek)±DOF (µm) =6. Finite-corrected optical system

Object point

Note: Size of camera image element (V x H x Diagonal)
1/3 inch image element: 3.6x4.8x6.0 mm 1/2 inch image element: 4.8x6.4x8.0 mm
2/3 inch image element: 6.6x8.8x11.0 mm

Magnification = L2/L1

λω x 250.000+
2x(N.A.)2
N.A. x M

λ = Standard wavelength(550 nm)

ω: Resolution of human eye (Visual angle: 5 minute)
M: Total magnification (Objective mag. x Eyepiece mag.)

λ±DOF (µm) =2x(N.A.)2

λ = Standard wavelength (550 nm)

Lens flare is typically seen as several starbursts, rings, or circles in a
row across the image or view, caused by unwanted image formation
mechanisms, such as internal reflection and scattering of light.

19. Double image

An image degrading a phenomenon in which an image appears as
if it is a double image due to redundant light projection and opticalinterference within the optical system.

Pupil diameterø mm = 2 x N.A. x f1
Illuminated field of view

13. Telecentric illumination

This illuminating optical system is designed so that principal light passes
through the focal point. This system has the advantage of retaining
the size of the image center even if it is out of focus (although thecircumference of the image is defocused). This illumination systemprovides an even illumination intensity over the entire field of view.

14. Aperture diaphragmThis diaphragm adjusts the amount of light passing through and isrelated to the brightness and resolving power of an optical system.
This diaphragm is especially useful in width dimension measurement ofcylindrical objects with contour illumination, and provides the highest
degree of correct measurement/observation by suppressing diffraction
in an optimal aperture.

15. Field stop

TV monitor observation

18. Flare

Objective

Indication magnification on TV monitor
Parfocalizing distanceThis unwanted effect is the reduction of an image's brightness or
saturation at the periphery compared to the image center. May becaused by external (lens hood) or internal features (dimensions of amulti-element lens).

• Pupil diameter
Denotes the maximum diameter of a parallel light flux along the opticalaxis that can enter an objective from the rear. The pupil diameter iscalculated according to the following expression.

24= ø2.4 (mm)10Diagonal line length
Indication magnification = Magnification x of monitor indicationof objective
Diagonal line length ofon TV monitor
camera image element

17. Vignetting

95

Distance between the surface of the specimen and the objective's seating
surface when in focus.

Denotes an objective lens that produces a flat (planar) image bycorrecting the spherical aberration/curvature of the field of an
achromatic lens or an apochromatic lens. All Mitutoyo FS series
objectives are plan apochromat.

20. Pupil Diameter and Spot Diameter of an Objective

Beam splitter

Area of specimen observable on TV monitor

4. Parfocalizing distance

16. PlanThis diaphragm is used for blocking out unwanted light and thereby
preventing it from degrading the image.

Beam spot diameter• Spot diameter
If a beam of light with a uniformly distributed intensity enters an
objective from the rear, the beam is focused to a spot of finite size.
This size is known as the spot diameter. The approximate value of aspot diameter is calculated from the following expression.
øµm = 1.22 x

λN.A.

However, the above expression cannot be applied if the light source is alaser beam of which the intensity forms a Gaussian distribution on the
cross section. The diameter of a laser beam is generally indicated by 1/e2of the peak value, i.e. 13.5% of the peak value. The spot diameter of alaser beam is calculated from the following expression.
øµm =

4xλxf
πxD

(where λ is in μm; f and D are in mm)

432408(JP7), Printed in Japan

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