Optical Measuring

Measuring Microscopes

MF/MF-U Series

Catalog No. E14003(7)LineupMF

Amazing Speed-up
Attainment of Reduction in Measurement Time

Z-axis Motor Drive & Vision Unit
Simple Focus Adjustment

SeriesUltra-high Speed AF Function

Standard Measuring Microscopes

Manual MF-A/B Models
Motor-Driven Z-axis MF-J Models

The ultra-high speed AF function has been installed
to allow focusing on a surface to be measured at a
speed of about one second.
Freedom from burdensome focus adjustment evenon a workpiece with many asperities allows theoperator to perform stress-free measurement,
drastically reducing operator's fatigue.

Application example: Cumulative total time of 3 mm stepheight measurement 10 times
90 seconds

Manual

Z-axis motor drive

50 seconds

45%
reduction

50秒* The amount of time saved is dependent on the particular workpiece and therefore thisresult is offered as an example but does not guarantee performance in all cases.
*Motor-Driven Z-axis

MF-U

Series

Universal Measuring Microscopes

Manual MF-UA/UB/UC/UD Models

Simplified Measurement
One-click Tool
The concurrent use of the vision unit as a vision
measurement system allows simplified measurementof an edge by merely one click. Moreover, since
many data points can be obtained at a time with justone click, this will drastically speed up measurement
and reduce data spread compared with theconventional method of "measuring data points one
by one with cross hairs".

One-click circle tool

One-click box tool

* Vision unit: Option

Motor-Driven Z-axis MF-UJ/UK Models
See video from here
*Motor-Driven Z-axis

23

Feature

Excellent Observability and Operability

High-accuracy Measurement

Ultra-wide View Field and High Magnification Observation

Best-in-Class Accuracy

Field Number: 24

Lineup of a Wide Range of Objectives

X/Y Axis: (2.2+0.02L) μm

This measuring microscope series has achieved an industryleading wide field of view of ø24 mm (when using 1X
objective).

The objectives available provide a choice of ultralow magnification, for excellent flare suppression, tohigh magnification that approaches the resolution
limit possible with optical wavelengths, allowing thecustomer to select an optimal magnification dependingon the intended use.

All models have achieved best-in-class accuracy
performance. Since the accuracy of the whole system isensured by conformity to the inspection method of JIS B
7153, any model enables high-accuracy measurement.
Any measuring microscope that achieves this accuracy
performance (close to JIS Class 0) will be a great asset tothe customer's quality control improvement program.

All models are equipped with a C-mount port asstandard to which a compatible camera is attachable.
The port allows a vision measurement system or an
observation-specific digital camera to be mounted.

0

Grade 1 error limits
Typical X-axis performance
Measuring range

Intuitive Operation

Reference) Measuring accuracy of each axis of a JIS B 7153
measuring microscope (at 20 °C)
Grade 0: (2+0.01L) μm or lessGrade 1: (4+0.02L) μm or less L: measured length (mm)

m

220m

ositioning is e

LOCK

asily selectedQuick Release
Wheel

Precisely because measuring microscopes in this series arewidely used in widely different industries, Mitutoyo offersa choice of stage size from 100×100 mm to maximum-inclass 400×200 mm. The customer can choose the optimal
size for the application with accuracy performance
guaranteed.

220mm

Rapid pA Wide Choice of Stage Size
m

FREE

0m

Quick Release Mechanism
The manual stage provides intuitive positioning and canbe easily moved rapidly between measuring positions
on a workpiece by using the quick release function oneach axis. Just free a Quick Release Wheel and move thestage by pushing and pulling. Lock the wheel to continue
measurement with fine feed. Very effective for traversing
between widely separated positions.

ExampleMeasuring
Error

30

A Camera Port on All Models

As of April, 2016

Y axis200 mm

300mm

X axis 400 mm

Vision Unit
The vision unit allows anyone to perform simplified
measurement of an edge with just one click.
Also, using the vision unit eliminates the need forburdensome parallel alignment of a workpiece and data
point detection with cross hairs, thus allowing quick
inspection of dimensions.
Vision unit: Option (Refer to page 10 to 14 for details)

45Feature

MF Series – User-friendly Standard Model –Manual (2- or 3-axis)

Z-axis Motor Drive

Reduction in Magnification Error due to Variation in Point of Focus
Telecentric Optical System
In order not to change the observing magnification even at low
magnification (10X or less) where the objective's precise working
distance is difficult to accurately reproduce because of a wide
focal depth, this series has adopted the telecentric optical systemthat reduces the magnification error due to slight variation in
working distance.
Also, the MF series objectives are manufactured with a moreaccurate magnification due to Mitutoyo's unique specificationthat surpasses JIS Standards. This optimizes comparative
measurement with a reticle.

CameraCounterPort

CameraCounterPort

Zerosetting

Quick
ReleaseZerosetting

Quick
ReleaseFS
Objective

Tilting

FS
Objective

Tilting

Z-axisMotor

VisionAF

Z-axisMotor

VisionAF

RemotePower
TurretRemotePower
TurretSafe Operation
Ultra-long Working DistanceAn ultra-long working distance is ensured in the entire
lineup of a wide variety of objectives between 1X and
100X. This practically eliminates any risk of collision witha workpiece even when surface asperities are present.

Working distance
61.0 mm77.0 mm61.0 mm51.0 mm
長作動距離20.0 mm13.0 mm
6.0 mmObjective
ML1X
ML3X
ML5X
ML10X
ML20X
ML50X
ML100X
View of icons

Easy Change of Magnification
Sliding Nosepiece
The MF series usually allows only a single objective to be
mounted which needs to be replaced for every magnification
change. The sliding nosepiece allows up to two objectives tobe mounted.
In the case of measurement that needs frequent magnification
change, this nosepiece design drastically improves workability.
(Refer to page 18 for details)

6Standard-equipped function
Not supported

Camera Camera port for mounting a digital camera
Port (standard equipment on all models)

Low-profile digital display possible to install
Counter on the left or right side and adjust tilt angle
to suit the operator

Zero- Handy zero-set switch that minimizes thesetting operator's hand motion

Quick-release mechanism that allows rapid
Quick
stage positioning
Release(Only for manual XY stage models)Possible to mount an objective that enables
FS
Objective various observation methods.
(Only for the MF-U series)

Tilting optical tube that can adjust the eyepoint
Tilting to suit the operator's physique(Standard-equipped in the MF-U series)

Z-axisZ-axis motor drive for fast Z-axis focusing
Motor

Vision auto focus function that speeds up
Vision measurement by reducing the operator'sAFfocusing error

RemoteRemote control box that enables handy
operation

Motor-powered turret enables faster operation
Power when several objectives are required for
Turretmeasurement

7

Feature

MF-U Series – Universal Model Dealing with Diverse Observation Methods –Manual (2- or 3-axis)

Clear Observation Image

Detection of Microscopic Flaws and Asperities

Apochromat Lenses

Diverse Observation Methods

This series provides a clear observation image with excellent
color quality, ultra-long working distance for high operability
and apochromatic design that eliminates chromatic aberration.

A choice of observation method such as dark-field observation,
simple polarized observation and differential interference
observation in addition to bright-field observation of magnified
images are selectable depending on the intended use.

Ordinary observation (bright-field)

Z-axis Motor Drive

Standard-equipped function
Dark-field: Allows highlighted observation of microscopic abnormalities such as flaws and contaminationby using diffused light.

Not supported

Selectable as an option

8

CameraCounterPort

Zerosetting

Quick
ReleaseZerosetting

Quick
ReleaseFS
Objective

Tilting

FS
Objective

Tilting

Z-axisMotor

VisionAF

Z-axisMotor

VisionAF

RemotePower
TurretRemotePower
TurretDifferential interference: A llows observation of microscopic asperities hard to detect withordinary bright-field observation.

View of icons

Ordinary observation (bright-field)

CameraCounter
Port

Polarization Unit

Differential Interference Unit

Used when performing simple
polarized observation.
It is also recommended to use this unit
for increasing image contrast during
use of a low-magnification lens.

Used when performing differential
interference observation.
This unit is used in combination withthe polarization unit.

Camera Camera port for mounting a digital camera
Port (standard equipment on all models)

Low-profile digital display possible to install
Counter on the left or right side and adjust tilt angle
to suit the operator

Zero- Handy zero-set switch that minimizes thesetting operator's hand motion

Quick-release mechanism that allows rapid
Quick
stage positioning
Release(Only for manual XY stage models)Possible to mount an objective that enables
FS
Objective various observation methods.
(Only for the MF-U series)

Tilting optical tube that can adjust the eyepoint
Tilting to suit the operator's physique(Standard-equipped in the MF-U series)

Z-axisZ-axis motor drive for fast Z-axis focusing
Motor

Vision auto focus function that speeds up
Vision measurement by reducing the operator'sAFfocusing error

RemoteRemote control box that enables handy
operation

Motor-powered turret enables faster operation
Power when several objectives are required for
Turretmeasurement

9Optional
Accessories

Optional
Accessories

Camera/Images

Vision Unit

Camera/Images

Vision Unit
Dedicated Software - QSPAK -System example

Reduction of Variation/Improvement in Efficiency

Simple/Universal Mode Switching (EZ/PRO)The vision unit allows anyone to perform simplified measurement of an edge with just one click.
Also, using the vision unit eliminates the need for burdensome workpiece orientating and data point detection with cross hairs, thus allowing
quick inspection of dimensions.

In the EZ mode for Simple & Operation guidance display, this software allows even a beginner to perform measurement without any confusion using theeasy-to-understand measurement icons and guidance function. Also, it supports the needs of more advanced measurement by the ability to switch to
the PRO mode where the full functions of QSPAK are supported.

About

90 % reduction in variation

About

10

70 % reduction in average measurement time

Unit: µm

Unit: µm

12

EZ mode (Simple measurement mode)

120

10 µm

8

80

6

60

4

30 seconds

40

1 µm

2

105 seconds

100

20

0

PRO mode (Universal measurement mode)0
Measuring
microscope only

Measuring microscope& vision unit

Measuring
microscope only

Measuring microscope& vision unit

Simple Edit of Measurement Program (Smart Editor)

Measurement results and measurement times when measuring a width of about 20 mm thrice (continuous reciprocation)
Measurement with the measuring microscope only
Max. value (mm)Min. value (mm)Variation (mm)Measurement time (sec)

Operator A
20.0863
20.0765
0.009876

Operator B
20.0849
20.08020.0047150

Operator C
20.081120.0758
0.005389

Max. value (mm)Min. value (mm)Variation (mm)Measurement time (sec)

20.0863
20.0758
0.0105
105

Operator C
20.08520.08370.001325

Max. value (mm)Min. value (mm)Variation (mm)Measurement time (sec)

20.0853
20.08370.001628

This function simply enables program correction/edit by only selecting an item you want to edit from among existing programs.

平均測定時間も約30%に短縮（105秒→30秒弱に）Measurement with the measuring microscope & vision unit
Max. value (mm)Min. value (mm)Variation (mm)Measurement time (sec)

Operator A
20.0847
20.08460.000136

単位：µmOperator B
20.0853
20.08420.0011
23

Editing light conditions with the dialog box

単位：µm

12

120

10

Simplified Report/Storage Function

Editing the nominal value/tolerance with the dialog box

100

8

Editing a circle tool on the video window

80

6This series has the functions to perform tolerance verificationof measurement/calculation results, various statistical processing for 60each item and image
バラつきを約11.4%まで減少
load/storage, enabling storage of measurement results and4 images at measured points.
（10µm→1µm台に）
40
Since measurement results can also be outputted in the CSV
format,thisallowssmoothcreationof inspection table.
2
20

0

10

測定顕微鏡
のみ

測定顕微鏡
&画像ユニット

0

測定顕微鏡
のみ

Edge Detection Functions

平均測定時間も約30%に短縮（105秒→30秒弱に）Outlier Removal Function···················Removes outliers such as burrs and chips.
Dual-area Contrast Tool·······················Automatically adjusts the light intensity of two areas to the optimum.
測定顕微鏡
Auto
Trace Tool·····································Automatically detects contour data while predicting the next one.
&画像ユニット
To perform contour analysis and contour tolerancing, use 2-dimensional analysis software (FORMTRACEPAK-AP).

11

Optional
Accessories

Optional
Accessories

Camera/Images

Camera/Images

Optional Software

Vision Unit
Dedicated Software - QSPAK -System example

Simplified Multi-point Measurement (One-click Tool)

2-dimensional Analysis Software - FORMTRACEPAK-AP -A mere click on an edge allows correct measurement, avoiding thevariation inherent in conventional multi-point measurement.
The function to remove outliers such as burrs and chips can be usedconcurrently.

FORMTRACEPAK-AP allows contour analysis and comparative verification with the nominal value, making use of the point group data acquired with theauto trace tool.
Form analysis can be performed seamlessly from measured
images with simple operations.

One-click circle tool

Contour tolerancing against the nominal value is also enabled.
For example, the software allows over-pin diameter measurement
by defining virtual circles with a given diameter around a gear.

One-click box tool

Graphics Function
This function automatically displays the current position, coordinate
system, measurement feature and measurement result on the graphics
window to prevent an omission or error of measurement from occurring.
It also enables you to grasp which portion of the whole workpiece isobserved by importing 2-dimensional CAD data*.

Example of gear contour matching, and an over-pin diameter analysis* Optional software (For details refer to Page 13.)

Example of form analysis

Navigation Function (Quick Navigation)
Once a measurement program is created, anyone can measure a
workpiece just as well as skilled personnel by merely following thenavigation instructions at the next measuring point.

Effective use of CAD model - QS-CAD I/F -Early detection of process irregularities - MeasurLink -2-D CAD model data (DXF-, or IGES-formatted) can be imported into
QIPAK. Conversely, QIPAK measurement results can be converted into
2-D CAD model data. The design value for each measurement item is
automatically entered. Since the graphics window makes the present
position easy to identify, the operator can quickly move the stage a given
point in the 2-D CAD model.

Statistical data can be displayed in real-time, making early detection ofprocess irregularities possible. Early identification of an out-of-control
situation enables rapid remedial action to be taken when necessary.

Examples of remedial action• Mold repair or cycle-timing change• Cutting tool adjustment or replacement.

Present position(1) The next measuring point isindicated with red cross hairs.

12(2) Approaching the measuring point,
the red cross hairs and green crosshairs come close to each other.

(3) When both cross hairs overlap one
another while indicating the target
point, press the Input button tocomplete the measurement.

13

Optional
Accessories

Optional
Accessories

Camera/Images

Camera/Images

Calculation processing

System example

Specifications
Vision Unit 10D
Code No.
Magnification of optical system
Image detection
Resolution
Measuring accuracy for each axis
(in a 20°C environment)
Accuracy (in a 20 °C environment)
PC system
SoftwareApplicable model

Data Processing Applications
359-763
When installed on the microscope 0.5X (using the 0.5X TV adapter)
High sensitivity 1/2-inch CMOS color camera with 300 million pixels
0.1 μm2-dimesinal Data Processing Unit
QM-Data200

Foot Switch

264-160-10
QM-Data200 allows various data processing operations andcreation of measurement programs without needing any otherdata processing unit.
Resolution:
0.1 µmProgram function: Creation, execution and editing of measurement procedures
Statistical processing: Measurement items, number of data, maximum value,
minimum value, mean value, standard deviation, range,
histogram and statistics by measurement function (statistics bycommand)
Display:
TFTLCD (with LED backlight)
Tilting mechanism: Installed

Code No.: 12AAJ088
Application: Foot switch for data transfer
A measurement result can be transferred to the dataprocessing unit by stepping on the switch while holding
the feed wheels.

Depends on measuring microscope
Depends on measuring microscope
Reference: when using a 3X ML objective (performing an inspection using our standard sample)
Screen-internal repeatability (3 s): ±2.5 μm or lessWindows 10 64bit
QSPAK VUE
MF D/MF-U D

Note: Software (QSPAK VUE) and calculation processor are required separately.

Code No.:
Application:

Calibration Chart
Calibration Chart
This chart is used for pixel-size correction of the CCD, and autofocus accuracy and optical-axis offset corrections for each selectedmagnification.
* The function may be limited depending on the lens.
For detailed information, contact a Mitutoyo sales office.

Code No. 02ATN695

OthersC-mount Adapter

0.5X TV Adapter (including C-mount)

This adapter is used to mount a C-mount compatible
digital camera on the microscope main unit.

This adapter is used to mount a C-mount compatible digital
CCD camera on the microscope main unit, thereby making
an observation area on the monitor close to the real field ofview through the objective.

Code No. 970441

14

Code No. 375-054

15

Optional
Accessories

Optional
Accessories

Eyepieces/Optical Tubes

Optical Tubes

For MF D

ReticlesSelectable Eyepiece Unit for MF series (One of the four options must be selected)
Monocular Tube
Binocular Tube
Protractor Eyepiece

Digital Protractor Eyepiece

Code No. 176-392

Code No. 176-313

Code No. 176-393

Code No. 375-043

Fixed
index line

12AAG838 (MF D)
12AAG878 (MF-U D)

Rotating
index line

Binocular tube reduces eye fatigue.
*W F10X/24 eyepiece (2 pcs.) equipped.

Main scale/31˚ >31˚35´Vernier/35˚

90° chain lines
Chain line pitch: 0.2 to 0.2
Line width: 7 µm

12AAG836 (MF D)
12AAG877 (MF-U D)
90° chain lines
Chain line pitch: 0.2 to 0.2
Line width: 5 µm

12AAG873 (MF D)
12AAG876 (MF-U D)
90° chain lines
Chain line pitch: 0.2 to 0.2
Line width: 3 µm

Main
scale

Graduation: 5’
Measuring range: 360°
The angle reading scale is built in, allowing
angle measurement by simply rotating
an index line between the features to bemeasured.
* Exclusive-use eyepiece is equipped (10X,
Field number: 21)

Magnification 10X, Field number 22
Resolution: 0.01°/1’ Switchable
Measuring range: 0-369.99°
An angle is measured by simply rotating
the cross hairs. Eliminates misreading
errors that can occur with the scale type.
* Exclusive-use eyepiece is equipped(10X, Field number: 22)

High-performance optical tube* for MF-U series

12AAG839 (MF C/MF D)
12AAG879 (MF-U D)(MF-U Dedicated Standard Option)
Adjustable eyepiece angle enables the eye point to be adjusted according
to operator physique, reducing eye strain and enabling comfortable
observation.
* WF10X/24 eyepiece (2 pcs.) equipped.

For MF-U D

Chain line type

Vernier scale

Simple, low-priced monocular tube.
*W F10X/24 eyepiece (1 pc.) equipped.

Eyepieces/Optical Tubes

90° solid lines, 45° chain lines
Chain line pitch: 0.2 to 0.2
Line width: 5 µm

0 to 30°

12AAG840 (MF C/MF D)
12AAG880 (MF-U D)
90° chain lines, 60° chain lines
Chain line pitch: 0.2 to 0.2
Line width: 5 µm

Graduation line type (Objectives for MF series. Use these reticles with an eyepiece that has 10X magnification.)

Eyepieces
In addition to a standard accessory 10X lens, high magnification lenses, 15X and 20X, are available to suit various applications.

Eyepieces
Code No. (1 piece)
Code No. (2 pieces)
Magnification
Field number

0 10 20 30 40 50 60 70 80 90100

WF10X/24
378-866-5
378-866
10X
24

WF20X/12
378-858-5
378-858
20X
12

Cross haired graduation lines
0.1/20 mm
Line width: 7 µm

Focus Detector Unit
Projecting an LED-generated chart pattern on the target enables easy and highaccuracy focusing, effectively reducing human and repetition errors in heightmeasurement.
The concentric circle pattern and slit pattern can be switched. The color of thepattern is selectable from green and red to suit workpiece surface characteristics.

Focus Detector Unit Focus Pilot
Model No.
FP-05
FP-05U
Code No. 375-057 (Green) 375-058 (Red) 375-067 (Green) 375-068 (Red)Green LED or Red LED• Concentric circle pattern		 • Slit patternLight source · The focal point is the positon where the top and bottom of the pattern are aligned.
· Pattern selection and brightness adjustment are enabled according to
the surface status of a workpiece.
· Observation with a wide field of view on a video monitor is available
using 0.5X optical system (with a CCD camera mounted separately).
Focusing
Approximately 1.5 μm (when using a 20X lens)reproducibility Note: In-company measured reference value of a sample
Applicable
MF
MF-U
model

16

12AAG842 (MF D)

12AAG843 (MF D)
Concentric circles with
graduation linesø1.2 to ø18
Line width: 7 µm

12AAG844 (MF D)
Graduation lines
0.1/10 mm
Line width: 10 µm

Reticle for digital protractor eyepiece (included as standard)

90° solid lines, 45° chain lines
Chain line pitch: 0.2 to 0.2
Line width: 5 µm

Each reticle includes an insertion unit. Since the insertion unit is specific to the model, select applicable reticles for your microscope.

17

Optional
Accessories

Objectives

Objectives for MF Series
ML Objectives

Objectives for the MF-U Series
FS objectives

ML Objectives
Numerical View field with View field with Resolving
Model No.
Code No. Magnification Aperture
CCD cameraPowereyepiece(mm)*2(NA)(μm)(mm)*1ML 1X
375-036-2
1X
0.03
ø24
12.8×9.6
9.2
ML 3X
375-037-1
3X
0.09
ø8
4.27×3.2
3.06
ML 5X
375-034-1
5X
0.13
ø4.8
2.56×1.92
2.12
ML 10X375-039
10X
0.21
ø2.4
1.28×0.96
1.31
ML 20X375-051
20X
0.42
ø1.2
0.64×0.48
0.65
ML 50X375-052
50X
0.55
ø0.48
0.26×0.19
0.5
ML 100X
375-053
100X
0.70
ø0.24
0.13×0.10
0.4*1: View field with eyepiece is a view field when using eyepiece 10× (Standard accessory).
*2: View field with CCD camera is a view field when using Mitutoyo Vision Unit (P10 to P14).

Compatible observation method: Bright-field observation
Advantage: A measurement error is reduced with the correct magnification.
The telecentric optical system is adopted for a magnification of 10X or less to
reduce measurement error due to an out-of-focus condition.

Sliding Nosepiece (Factory-set Option)
Two ML objectives can be mounted, allowing stress-free change ofmagnification. Two types are available according to the switchingspecifications.
· Parfocal Type (Code No. 176-370-1)
	Since the focus of the two lenses, a reference lens (ML 3X) and thespecified lens*, are both pre-adjusted, focusing after switching thelens is unnecessary.
Note: The parfocal condition is not achieved with any lenses otherthan the specified combination.

· Magnification Type (Code No. 176-370-2)
The magnification of two lenses is guaranteed in a combination ofa reference lens (ML 3X) and pre-specified lens*.
Recommended when using the guide-equipped reticle orcomparison-measurement reticle.

Working Depth of
distance Focus ±D.F.
(mm)
(μm)
61.0
306
77.0
34
61.0
16.3
51.0
6.2
20.0
1.6
13.0
0.9
6.0
0.6

Numerical View field View field with Resolving Working
Depth of
Magnification Aperture with eyepiece CCD camera Powerdistance Focus ±D.F.
(mm)
(mm)*
(μm)
(NA)
(μm)
(mm)
M Plan Apo 1X
378-800-12
1X
0.025
ø24
12.80×9.60
11
11.0
440
M Plan Apo 2X
378-801-12
2X
0.055
ø12
6.40×4.80
534.0
91
M Plan Apo 5X
378-802-6
5X
0.14
ø4.8
2.56×1.92
2
34.0
14
M Plan Apo 7.5X
378-807-3
7.5X
0.21
ø3.2
1.71×1.28
1.3
35.0
6.2
M Plan Apo 10X
378-803-3
10X
0.28
ø2.4
1.28×0.96
1
34.0
3.5
M Plan Apo 20X
378-804-3
20X
0.42
ø1.2
0.64×0.48
0.7
20.0
1.6
M Plan Apo 50X
378-805-3
50X
0.55
ø0.48
0.26×0.19
0.5
13.0
0.9
M Plan Apo 100X
378-806-3
100X
0.70
ø0.24
0.13×0.10
0.4
6.0
0.6
M Plan Apo SL 20X
378-810-3
20X
0.28
ø1.2
0.64×0.48
1
30.5
3.5
M Plan Apo SL 50X
378-811-15
50X
0.42
ø0.48
0.26×0.19
0.7
20.5
1.6
M Plan Apo SL 100X 378-813-3
100X
0.55
ø0.24
0.13×0.10
0.5
13.0
0.9
M Plan Apo HR 50X
378-814-4
50X
0.75
ø0.48
0.26×0.19
0.4
5.2
0.49
M Plan Apo HR 100X 378-815-4
100X
0.90
ø0.24
0.13×0.10
0.3
1.3
0.34
Air conversion29.42 3.5
G Plan Apo 20X (t3.5) 378-847
20X
0.28
ø1.2
0.64×0.48
1
G Plan Apo 50X (t3.5) 378-848-3
50X
0.50
ø0.48
0.26×0.19
0.6 Air conversion13.89 1.1
Model No.

M Plan Apo Objectives
Compatible observation method: Bright-fieldobservation, simple polarized observation,differential interference observation
Advantage: Plan apochromat lenses freeof spherical aberration/chromaticaberration are adopted to obtain images
with excellent color reproducibility
without blur over the entire field of view.

G Plan Apo Objectives
Compatible observation method:
Observation through a cover glass
Advantage: Correction design is performed so
as to obtain optimal observation images
when observing through the glass.
(Corrected on the basis of BK7 and acover glass thickness of 3.5 mm. Custom
order of other glass material andthickness is also available.)* View field with CCD camera is a view field when using Mitutoyo Vision Unit (P10 to P14).
Note: SL: Super long working distance model
HR: High Resolution model

Numerical View field View field with Resolving Working Depth ofMagnification Aperture with eyepiece CCD camera Power distance Focus ±D.F.
(mm)
(mm)*
(μm)
(mm)
(μm)
(NA)
BD Plan Apo 2X
378-831-12
2X
0.055
ø12
6.40×4.80
534.0
91
BD Plan Apo 5X
378-832-7
5X
0.14
ø4.8
2.56×1.92
2
34.0
14
BD Plan Apo 7.5X
378-830-7
7.5X
0.21
ø3.2
1.71×1.28
1.3
34.0
6.2
BD Plan Apo 10X
378-833-7
10X
0.28
ø2.4
1.28×0.96
1
34.0
3.5
BD Plan Apo 20X
378-834-7
20X
0.42
ø1.2
0.64×0.48
0.7
20.0
1.6
BD Plan Apo 50X
378-835-7
50X
0.55
ø0.48 0.26×0.19
0.5
13.0
0.9
BD Plan Apo 100X
378-836-7
100X
0.70
ø0.24 0.13×0.10
0.4
6.0
0.6
* View field with CCD camera is a view field when using Mitutoyo Vision Unit (P10 to P14).
Model No.

BD Plan Apo Objectives
Compatible observation method: Bright-fieldobservation, dark-field observation, simple
polarized observation, differential interference
observation
Advantage: Dark-field observation is also supported
while maintaining the performance of the M
Plan Apo objective series.

Code No.

Code No.

TurretNote: Blurring may occur when switching the lens.
* Select a lens from the ML objective lenses other than ML 3X.

Manual turret for Bright-fieldand dark-field (4 ways)

Manual turret for
Bright-field (4 ways)

Powerl turret for Brightfield and dark-field (4 ways)

Mounting example of power turret (No. 378-216)

Supported observation
Bright field (M Plan Apo/G Plan Apo)
Bright and dark field (BD Plan Apo)
Code No.
378-018378-216
176-211176-212Driving method
ManualPower
ManualPower
Number of ways
45
4
4
Aligning/Parfocal mechanism
Aligning/Parfocal
Aligning——* When using the turret without parfocal mechanism and objectives, it is recommended to concurrently use "Parfocal Adjustment SIMM Set" (for bright-field observation:
Code No. 378-089, for dark-field observation: Code No. 378-090).

18

19

Optional
Accessories

Optional
Accessories

Rotary tables

OthersRotary table with Fine Wheel (A)Rotary table with Fine Wheel (B)Holder with Clamp

V-block with Clamp

Swivel Center Support

Code No.: 176-305
Application: Workpiece orientating/positional fine-adjustment
External dimension: 280 (W)×280 (D)×23.7 (H) mm
Tabletop: ø240 mm, 360° rotation, no angle scale
Mass: 5.5 kg
Effective glass diameter (mm): ø182
Applicable model: Size 1010, 2010 (MF/MF-U series)* Option: 172-197 Swivel Center Support
176-107 Holder with Clamp
172-378 V-block with Clamp

Code No.: 176-306
Application: Workpiece orientating/positional fine-adjustment
External dimension: 342 (W)×342 (D)×23.2 (H) mm
Tabletop: ø270 mm, 360° rotation, no angle scale
Mass: 6.5 kg
Effective glass diameter (mm): ø238
Applicable model: Size 2017, 3017, 4020 (MF/MF-U series)* T he V-block with Clamp, Swivel Center Support and Holder with Clamp can NOT be
mounted on the table.

Code No.: 176-107
Application: Used to clamp a thin workpiece such asa PCB or pressed part.
Maximum clamp length: 35 mm
External dimensions: 62 (H)×152 (W)×38 (D) mm
Mass: 0.4 kg

Code No.: 172-378
Maximum clamping diameter: ø25 mm
Height from the mounting surface to the center: 38-48 mm
Application: Used to mount a cylindrical-form workpiece.
External dimensions: 117 (H)×90 (W)×45 (D) mm
Mass: 0.8 kg* Note: Size 2010 is used with stage adapter B. Sizes
2017, 3017, and 4020 are usable with stage adapter* Note: Size 2010 is used with stage adapter B. Sizes
2017, 3017, and 4020 are usable with stage adapter

Code No.: 172-197±10° for swivel position
Maximum angle index: 1°
Application: Used to mount a center-machined workpiece formeasurement of screw pitch diameter, depth, etc.
Maximum horizontal clamping size: ø80×140 mm
Maximum clamping size when inclined 10°: ø65×140 mm
Mass: 2.5 kg

120
84

2-6.6 drill ø11counter sink
(12)

2

45°

45°
64

7

15
(13)
(7)

256
280

12

13

25
50
12

(152)

64

A

3.5 3
Part A dimensions

ø12
87

45

75

66

12

16 31
74
93
ø28

11

42

20

5
8

48.5
117

220

Negative type scale

Code No.: 375-056
Scale length: 1 mm
Application: F or verifying magnification of objective lensMinimum graduation: 0.01 mm
Scale accuracy (20 °C): 1+L (μm) L: length between any two lines (mm)External dimensions: 76 (W)×26 (D) mm
Mass: 16 g
* Note: After purchasing the product, we perform calibration.
For details, contact your neatest Mitutoyo Sales Office.

220

75

45

ø12

ø28

125

87

x
ma
（
5 in）
2
ø m
4
ø（

31
74
93

42
150
200

16

11

5
8

90ʼ(87ʼ(0)°

取付用T溝寸法

66

20

12

Vibration240Damping Stand

33.6
37.9
48.5

117

41
42.8

Stage size

125

）

55.5
43

25
50
15
13
7
176-304 Stage Adapter

2010

13
7
75（70〜80可能）

Positive type scale

3.5 3
T-groove dimensions

N=2

33.6

2-6.6×11.6長穴

45
10

105
152

29

282
340

Clamping workpiece dimensions

Mounting Stand (for Microscope)

2-6.6 drill ø11 counter sink depth 12
29

150
200

37.9

24

52.5

35
1.5

9

Code No.: Stage Adapter: 176-304
Stage Adapter B: 176-310
Application: Used when setting the workpiece fixture on the stage.
External dimensions for one piece:		
50 (W)×340 (D)×15 (H) mm
		*Note) Adapter B is 280 (D)Mass: Stage Adapter: 1.5 kg
Stage Adapter B: 1.2 kg——

90° 2.5

T-groove dimensions
ax)
(m )
5
ø2 (minø4

4-6.8穴（ ）13 Micrometer
Stage
T溝詳細 44 75

M6

240

15

7

3 2

220
342

ø28
8

13
19

(0.7) 9.5 13
Turning knob
23.2

9 20（9）
38

2017
3017
4020
Not applicable Applicable
Applicable Not applicable

45
10

15
52.5

35
105
152

C
4-

(137.618)

Stage Adapter

176-304
Stage Adapter
176-310
Stage Adapter B
Note: Not required for model 1010.

41

90

Clamp screw

1010

75
(Permissible 70 - 80)

75

55.5
43

9 20 (9)38

4-6.8 hole

42.8

2

ø6

3 2
9

282
342

ge
sta

(96.361)

tive
fec
(ef

(44)

1.5

ter)
iame
ide d
lass
ge g
ø 24
5 (staT-groovedimensions* Note: Size 2010 is used with stage adapter B. Sizes
2017, 3017, and 4020 are usable with stage adapter

2-6.6×11.6 long hole
13
7

58

0

(103.945)
Turning knob

ø

8
23

22.5

23.7

M6
Clamp screw

ø184(Table inside diameter)

ge
sta
ive
ect

(eff

82

ø1

(103.945)

2-M6 depth 8

ø5

280
256
220

ø 220

uts ø 240
ide
dia
me
ter
)

13 10.5(0.2)

12

so

ter)
me
dia
side
le in
(tab

8

las

13

)
ter
me
dia
ss ø 270
gla
41

19 13
13

eg

7

ø2

2-M6 depth 8

Clampscrews (2)

˚

tag

ø28

24

120

ø1
88
(s

Clamp screws (2)

outs

r)
ete

7
37˚ 0

iam

31
29˚

2-ø7 hole,
Lip: ø14, counter sink depth: 4

220
ss d

280

gla

30

120
84

90

支持可能ワーク詳細図

Code No.: 176-309
Application: Microscope main unit mounting standMaximum loading: 300 kg
External dimensions: 1200 (W)×900 (D)×650 (H) mm
Mass: Approximately 50 kg
Applicable model: MF/MF-U* Note: When specifying a microscope with the Vision
Unit, we recommend selecting the large mounting
stand No. 02ATE760, which has external dimensionsof 1,800 (W)×900 (D)×740 (H) mm.

Code No.: 176-308
Application: Microscope vibration isolation table
Supporting method: Spring pad
Maximum loading: 200 kg
External dimensions: 750 (W)×550 (D)×36 (H) mm
Mass: 36 kg
Applicable model: MF/MF-U

176-310 Stage Adapter

20

21

Optional
Accessories

Optional
Accessories

Internal light source

External light source

LED Illumination Unit

LED Ring Light

The LED illumination unit has a longer operating life than a halogen bulb.

For MF series

For MF series: Transmitted/Reflected illumination Set Code No. 176-445
For MF-U series: Transmitted/Reflected illumination Set Code No. 176-446

This illumination unit provides a high image contrast for observationof deep-color resins, PCBs and small-diameter cylinders, thus providing
optimal performance for vision measurement. Even if the brightness ofillumination is changed, no color will change.

: Code No. 176-367-2 (Standard): Code No. 176-371 (Specific to Sliding Nosepiece)
For MF-U series : Please contact with your local Mitutoyo Sales Office.

This reduces running costs and saves the trouble of replacing the bulb. Also,a quick response to light control allows stress-free search for the illumination
condition best suited to a workpiece.

For transmitted
illumination

Code No. 176-445

Halogen Illumination Unit

For reflected
illumination* The ring light illumination is compatible with ML objectives of 10X or less. If
an objective with a magnification of more than 10X is used, there is a risk ofdifficulties in observation due to insufficient light intensity.

LED Ring Light /Fiber-Optic Ring Light

Select this illumination unit when measuring a low-reflectivity workpiecerather than the standard LED illumination unit.

Mounted on MF series

Mounted on MF-U series

Dual swan-neck light pipe

For MF series: Transmitted/Reflected illumination Set Code No. 176-447
For MF-U series: Transmitted Code No. 176-448
Reflected 100 W (Standard) Code No. 176-386
150 W (High brightness) Code No. 176-316
Code No. 176-447

Code No. 176-316

Spare lighting

Vertical Transmitted Illumination

Select high-brightness or long-life lighting according to your application.
Applicable model
MF
MF-U
External light source

Applicable model
176-447
176-448
176-315
176-316
176-366 /176-343

Illumination method
Transmitted/reflectedTransmitted
Reflected (100 W)
Reflected (150 W)
̶High-brightness type513667
513667
12BAD602
12BAJ075
12BAD602

Long-life type
12BAB345
12BAB345
51718112BAJ076
517181

Illumination filter
Select the optimal filter depending on the intended use.
GIF filter: Emphasizes contrast in the image.
LB filter: Converts the warm-colored halogen light to a more natural color.
ND filter: Reduces illumination intensity without changing the observation condition (color temperature) in spite of
the fact that halogen light becomes redder when darkened by decreasing the voltage.
			
ND2: Light intensity 1/2 (transmission factor 50 %) ND8: Light intensity 1/8 (transmission factor 12.5 %)Light source
LEDillumination
Halogenillumination

22

Applicable
model
MF
MF-U

Code No.

MF

176-447

MF-U

176-445
176-446
176-448
176-315

Illumination
methodTransmitted/
reflected
Transmitted/
reflected
Transmitted
Reflected(100 W)

GIF

LB80

ND2

ND8

12AAA645———

12AAA645

12AAA646

12AAA643

12AAA644

12AAG806

12AAG807——

Fiber-Optic Ring Light

Dual swan-neck light pipe

For MF series: Code No. 176-366 (Standard)

For MF and MF-U series: Code No. 176-343

The Fiber-Optic Ring Light is the best unit to use when a bright, shadowlessimage is required. This illumination is best suited to observation at highmagnifications and vision measurement.

This illumination unit highlights the features of a workpiece surface byapplying oblique light to it, forming shadows which aid viewing. Highbrightness spot lighting is also available by the concurrent use of thestandard-supplied condenser lens.

* The ring light illumination is compatible with ML objectives of 10X or less. If an
objective with a magnification of more than 10X is used, there is a risk of difficulties
in observation due to insufficient light intensity.

23Specifications
MF-U Series

MF Series
Manual Models
Main unit
Without Z-axis scaleWith Z-axis scale
Measuring accuracy*2 (20 °C, when not loaded)
Minimum reading
Optical tube
Observation

Incline angle
Observation image
Observation method

Eyepiece
Objective
Measuring range
Max. table loading
Stage
Feed mechanism
Swiveling angle
Internal light • LED Illumination Unit
source• Halogen Illumination Unit
External light source
Feed mechanism
Z axisMax. workpiece height
Main unit
Dimensions
Control unit
(W×D×H)
Control unit for illumination unit
OutputMass
Max. power consumption*3

Manual Models
1010
MF-A1010D
176-861*1
MF-B1010D
176-866*1

2010
2017
3017
4020
MF-A2010D
MF-A2017D
MF-A3017D
MF-A4020D
176-862*1
176-863*1
176-864*1
176-865*1
MF-B2010D
MF-B2017D
MF-B3017D
MF-B4020D
176-867*1
176-868*1
176-869*1
176-870*1(2.2+0.02L) µm L: measuring length (mm)High accuracy digital scale is mounted
1/0.5/0.1 μm switchable
Monocular or binocularTV camera port for all models (observation/TV camera = 50/50)*4 is provided as standard
Reticle (broken cross-hair, line width: 5 μm) is provided as standard
Various reticles are optional.
Angle of column: 25°
Erect image
Bright-field observation
10X (eyepiece field number: 24) is provided as standard
15X, 20X, Angle eyepieces 10X, Digital angle eyepieces 10X are optional.
3X (working distance: 77 mm) is provided as standard
1X, 5X, 20X, 50X, 100X, a pair of sliding nosepieces*5 are optional.
100×100 mm
200×100 mm
200×170 mm
300×170 mm
400×200 mm
10 kg
20 kg
15 kg
Manual and Quick-release mechanism (zero-set switch is incorporated)
±5°
±3°
－
White LED (transmitted/vertical reflected), no step modulated light
12 V, 50 W halogen (transmitted/vertical reflected), no step modulated light
Ring light and dual swan-neck light pipe are optional.
Coaxial coarse and fine feed, handles on both sides (coarse: 30 mm/rotation, fine: 0.2 mm/rotation)
150 mm
220 mm562×730×667 mm
624×745×667 mm
642×892×782 mm
692×892×782 mm
756×892×782 mm－
114×360×96 mm
RS-232C output, USB output for Vision Unit
Approx. 70 kg
Approx. 75 kg
Approx. 150 kg
Approx. 160 kg
Approx. 165 kg
LED: 45 W Halogen: 160 W
AC power input connector: 100 to 240 V

Motor-Driven Z-axis Models
1010

Main unit
With Z-axis scale
Z axisDimensions(W×D×H)
OutputMass

Feed mechanism
Max. workpiece height
Main unit
Control unit
Control unit for illumination unit

Max. power consumption*3

2010

2017
3017
4020
MF-J2017D
MF-J3017D
MF-J4020D
176-892*1
176-893*1
176-891*1
Motor drive (Maximum measuring speed: 20 mm/s),
lower limit setting (for collision avoidance with a workpiece)
220 mm642×892×782 mm
692×892×782 mm
756×892×782 mm
355×364×106.5 mm
114×360×96 mm
RS-232C output, USB output for Vision Unit
Approx. 160 kg
Approx. 170 kg
Approx. 175 kg
LED: 275 W Halogen: 390 W
AC power input connector: 100 to 240 V

Note: The specification other than the above is subject to the manual models.
• Required optional accessory*1 To denote your AC power cable add the following suffixes to the Code No.: A for UL/CSA, D for CEE, DC for CCC, E for BS, K for KC, C and No suffix are required for PSE.
*2 Measured in conformance with JIS B 7153
*3 Optional accessory is NOT target (Main unit and required optional illumination are target)*4 C mount is required separately.
*5 A pair of Sliding Nosepieces are factory-installed option.

Main unit
BF(Bright-field)
BD(Bright/
Dark-field)

Without Z-axis scaleWith Z-axis scale
Without Z-axis scaleWith Z-axis scale

Measuring accuracy*2 (20 °C, when not loaded)
Minimum reading
Optical tube
Observation

Incline angle
Observation image
Observation method

Eyepiece
TurretObjective
Stage

Internal lightsource• Bright-field (BF)
• Bright/Dark-field (BD)
Measuring range
Max. table loading
Feed mechanism
Swiveling angle• LED Illumination Unit
• Halogen Illumination Unit

External light source
Feed mechanism
Z axisMax. workpiece height
Main unit
Dimensions
Control unit
(W×D×H)
Control unit for illumination unit
OutputMass
Max. power consumption*3

1010
MF-UA1010D
176-871*1
MF-UB1010D
176-876*1
MF-UC1010D
176-881*1
MF-UD1010D
176-886*1

2010
2017
3017
4020
MF-UA2010D
MF-UA2017D
MF-UA3017D
MF-UA4020D
176-872*1
176-873*1
176-874*1
176-875*1
MF-UB2010D
MF-UB2017DMF-UB3017D
MF-UB4020D
176-877*1
176-878*1
176-879*1
176-880*1
MF-UC2010D
MF-UC2017D
MF-UC3017D
MF-UC4020D
176-882*1
176-883*1
176-884*1
176-885*1
MF-UD2010D
MF-UD2017D
MF-UD3017D
MF-UD4020D
176-887*1
176-888*1
176-889*1
176-890*1(2.2+0.02L) µm L: measuring length (mm)High accuracy digital scale is mounted
1/0.5/0.1 µm switchable
Tilting optical tube is provided as standard
TV camera port for all models (observation/TV camera = 50/50*4 is provided as standard
Reticle (broken cross-hair, line width: 5 μm) is provided as standard
Various reticles are optional.
Angle of column: 0-30°
Erect image
Bright-field observation/Dark-field observation (Only for MF-UC and MF-UD types)
Simple polarization and differential interference are optional.
10X (eyepiece field number: 24) is provided as standard
15X, 20X are optional.
Manual, motor drive
M Plan Apo, G Plan Apo series
BD Plan Apo series
100×100 mm
200×100 mm
200×170 mm
300×170 mm
400×200 mm
10 kg
20 kg
15 kg
Manual and Quick-release mechanism (zero-set switch is incorporated)
—
±5°
±3°
White LED (transmitted/vertical reflected), no step modulated light
12 V, 50 W halogen (transmitted), no step modulated light
12 V, 100 W (vertical reflected), no step modulated light*5
15 V, 150 W (vertical reflected), no step modulated light are optional.*5
Dual swan-neck light pipe are optional.
Manual handles on both sides (coarse: 30 mm/rotation, fine: 0.2 mm/rotation)
150 mm
220 mm562×730×667 mm
624×745×667 mm
642×892×782 mm
692×892×782 mm
756×892×782 mm—
114×360×96 mm
RS-232C output, USB output for Vision Unit
Approx. 70 kg
Approx. 75 kg
Approx. 150 kg
Approx. 160 kg
Approx. 165 kg
LED: 55 W Halogen: 190 W (vertical reflected 12 V, 100 W) and 240 W (vertical reflected 15 V, 150 W)
AC power input connector: 100 to 240 V

Motor-Driven Z-axis Models
Main unit
BF(Bright-field) With Z-axis scale
BD
With Z-axis scale(Bright/Dark-field)
Z axisDimensions(W×D×H)
OutputMass

Feed mechanism
Max. workpiece height
Main unit
Control unit
Control unit for illumination unit

Max. power consumption*3

1010

2010

2017
3017
4020
MF-UJ2017D
MF-UJ3017D
MF-UJ4020D
176-895*1
176-896*1
176-894*1
MF-UK2017D
MF-UK3017D
MF-UK4020D
176-898*1
176-899*1
176-897*1
Motor drive (Maximum measuring speed: 20 mm/s),
lower limit setting (for collision avoidance with a workpiece)
220 mm642×892×782 mm
692×892×782 mm
756×892×782 mm
355×364×106.5 mm
114×360×96 mm
RS-232C output, USB output for Vision Unit
Approx. 160 kg
Approx. 170 kg
Approx. 175 kg
LED: 285 W Halogen: 420 W (vertical reflected 12 V, 100 W) and
470 W (vertical reflected 15 V, 150 W) AC power input connector: 100 to 240 V

Note: The specification other than the above is subject to the manual models.
• Required optional accessory*1 To denote your AC power cable add the following suffixes to the Code No.: A for UL/CSA, D for CEE, DC for CCC, E for BS, K for KC, C and No suffix are required for PSE.
*2 Measured in conformance with JIS B 7153 *3 Optional accessory is NOT target (Main unit and required optional illumination are target)*4 C mount is required separately. *5 Select either one

24

25

Vision unit 10DSet• Vision unit
• Data processor• Main software

External camera system

DiagramC mount
970441

0.5X adapter(with C mount)375-054

Focus pilot FP-05
Green (375-057)/Red (375-058)

Required option for Motor-Driven Z-axis models

Vision AF cable (12AAN358)

Required option

Calibration chart (02ATN695)
Foot switch (12AAJ088)

MF Series
External control cable(12AAD128)
Filter• GIF Filter (12AAG806)• LB80 Filter (12AAG807)

Reticle P. 17
Eyepiece
10X
2pcs.
378-866
1pc.
378-866-5

Digital protractor eyepiece
176-313

Protractor eyepiece
375-043

Eyepiece
20X
2pcs.
378-858
1pc.
378-858-5

Monocular unit
176-392

External control cable(12AAG888)

Camera/Images
P. 10 - 15

Fiber-Optic Ring
(176-366)

Dual swan-neck(176-343)

LED Ring(176-367-2)

LED Ring (for FS Objectives)(176-371)
Sliding Nosepiece• 176-370-1• 176-370-2

Binocular unit
176-393

Various ML objectives

MF
Objectives
Eyepiece/Optical tube

P. 18

External light source

P. 23

P. 16

LED illumination unit 176-445

Rotary table/Others

Filter• GIF Filter(12AAA645)

Internal light source

P. 20, 21

Transmitted

P. 22

Reflected

Control unit

Halogen illumination unit 176-447
Size 1010

Size 2017/3017/4020

Size 2010
Rotary table with fine feed
wheel (A) 176-305

V-block with clamp
172-378

Stage adapter B
176-310

Swivel center support
172-197

Filter• GIF Filter･ ND2 Filter(12AAA645) (12AAA643)• LB80 Filter ･ ND8 Filter(12AAA646) (12AAA644)

Stage adapter
176-304

Transmitted Reflected

Rotary table with finefeed wheel (B) 176-306

Data processing

Control unit

P. 15

External printer cable(12AAA804)

Holder with clamp
176-107

External printerRS-232C cable (12AAA807)

QM-Data200 (264-160-10)

26Foot switch(12AAJ088)

27

*

Diagram

Vision unit 10DSet• Vision unit
• Data processor• Main software

External camera system
C mount 0.5X adapter
970441 (with C mount)375-054

Focus pilot FP-05
Green (375-067)/Red (375-068)

Required option for Motor-Driven Z-axis models

Vision AF cable (12AAN358)

Required option

Calibration chart (02ATN695)
Foot switch (12AAJ088)

MF-U Series
External control cable(12AAD128)
Reticle P. 17

Bright-field (UA/UB/UJ)
Turret with aligning/
parfocal mechanism
4 holes 378-018

Camera/Images

Eyepiece
20X
2pcs.
378-858

Eyepiece
10X
2pcs.
378-866

Filter (External light source)• GIF Filter (12AAG806)• LB80 Filter (12AAG807)

P. 10 - 15

Filter (Reflected)• GIF Filter (12AAG806)• LB80 Filter (12AAG807)

Dark-field (UC/UD/UK)

Aligning power turret
5 holes 378-216

Power turret 4 holes
176-212Eyepiece/Optical tube

Turret 4 holes
176-211

Dual swan-neck(176-343)

P. 16

MF-U

External light source

P. 23

RS-232C cable(12AAA807)
Objectives for bright-field

Connect to Vision unit*

Internal light source

AnalyzerP. 20, 21Size 2010
Stage adapter B
176-310

Swivel center support
172-197

Halogen illumination unit
176-448

Size 2017/3017/4020
Stage adapter
176-304

Holder with clamp
176-107

Rotary table with finefeed wheel (B) 176-306

Transmitted

Control unit

Filter• GIF Filter• ND2 Filter(12AAA645) (12AAA643)• LB80 Filter • ND8 Filter(12AAA646) (12AAA644)

P. 15
Data processing

External printer cable(12AAA804)

External printerRS-232C cable (12AAA807)

QM-Data200 (264-160-10)28Filter• GIF Filter(12AAA645)

Control unit

Transmitted Reflected

V-block with clamp
172-378

External control cable(12AAG888)

P. 22

LED illumination unit 176-446

Rotary table/Others

Rotary table with finefeed wheel (A) 176-305

External control cable(12AAD128)

P. 19

Polarization unit 378-092
Polarizer

Size 1010

Reflected
150 W fiber(176-316)

Objectives for bright-field/dark-fieldObjectives
Differential interference unit
5X,10X (378-080)
20X (378-079)
50X, SL20X (378-078)
100X, SL80X, SL50X (378-076)

Reflected
100 W fiber(176-315)

Foot switch(12AAJ088)

29

Dimensions
MF Series
Unit: mm

MF-B2010D

MF-J2017D
96

259

114

MF-B2017D

210
215
551
742+50355+100

16
121

114
100

MF-B3017D
96

96

259

78

215

114
150

360
114 255+150
291

255

360

401

150

85 147

215

621

120.3

249

782
247

464
121

120.3

621

96

247
621
889+85351+100

85 147244-330

79

782

79
464

782

100

327
78
249

247
360
114 205+100
291

351

MF-J4020D

360

327
249

360
205

360

259

782

782

168

247

168
360
269+100

401+150464-684

300+50

16
121

36

247

210
215
551
727+50464-684

667

422

86

205

168

249

249

360

168
360
234+5096

244-330

79

360
79

667

417
200

114

96

244-330

327
249
78
360

327
249
78

MF-J3017D

464-68496

259

Unit: mm

360

MF-B1010D

Motor-Driven Z-axis Models

360

Manual Models * Common dimensions for MF-A and MF-B models.

621
889+85121

200 114

305

360

451

200

100 147

215

621

120.3

MF-B4020D
96

259

247

464

782

79

360

327
78
249

114

30

360
305+200

451+200

621
889+100

121

31

Dimensions
MF-U Series
MF-UB2010D114

MF-UB2017D

168

210
215
551
742+50355+100

16
121

114
100

MF-UB3017D
96

85 147

96612-832

105

360
120.3

360
255

114
150

401

150

85 147

215

621

120.3

96

244-330

171

782
247

612

782
247

612

360
114 255+150
291

121

621

231

360
171
782

621
889+85351+100

215

356
125
231

247
360
114 205+100
291

100

MF-UJ4020D

259

356
231
125

351

401+150612-832

259

360
205

247

168
360
269+100

360

16
121

105

210
215
551
727+50300+50

36

247

168

231

782

782

667
570
205

86

360

168
360
234+5096

244-330

96
231
105

360

171
667
565
200

114

244-330

96

356
231
125

Unit: mm

MF-UJ3017D

612-832

259

96

356
231
125

MF-UJ2017D

171

259

Motor-Driven Z-axis Models * Common dimensions for MF-UJ and MF-UK models.

360

MF-UB1010D

Unit: mm

360

Manual Models * Common dimensions for MF-UA, MF-UB, MF-UC, and MF-UD models.

621
889+85

121

200

114

305

360

451

200

100 147

215

621

120.3

MF-UB4020D
96

259

247

612

782

171

360

356
125
231

114

32

360
305+200

451+200

621
889+100

121

33

Dimensions
Extraordinary Reliability
Stage Top View * Common dimensions for all models.

Unit: mm

20-M6 depth 14
ø11.5 countersink 90°
Cross-recessed flat head screw attached250

25 70 25220
280

25 70 25
220
256
280

180

25 70 25
220
256
280

180

Size 2010
200×100 mm

150

Size 1010
100×100 mm

20-M6 depth 14
ø11.5 countersink 90°
Cross-recessed flat head screw attached

25 70 25
220
290
350

Traceability to National Standards
Mitutoyo ensures and maintains traceability of various types of precision
measuring instruments by holding standards of length and other physicalquantities that are directly traceable to the national standards for use incalibrating the working standards used for the calibration of measuring
instrument products supplied to industry. Furthermore, Mitutoyo offers atemperature calibration service which is indispensable for high-accuracy
length measurement.

National Standard

National Metrology Institute of Japan/National Institute of Advanced
Industrial Science and Technology (NMIJ/AIST)The atomic clock synchronized to UTC

Secondary Standard

Mitutoyo Metrological Standards Calibration Section(JCSS Accredited Cal. Lab. No. 0067)
Frequency Standard Oscillator(As a standard of optical frequency comb)
Mitutoyo Metrological Standards Calibration Section(JCSS Accredited Cal. Lab. No. 0067)
633 nm Iodine Stabilized He-Ne Laser

Mitutoyo Utsunomiya Calibration Center(JCSS Accredited Cal.Lab. No. 0031)
633 nm Stabilized He-Ne Laser

Working Standard

Standard Scale and Reference Scale
Measuring Microscope

Outline of the traceability chain for a Mitutoyo microscope.

20-M6 depth 14
ø11.5 countersink 90°
Cross-recessed flat head screw attached

Size 3017
300×170 mm

Reliable support system

20-M6 depth 14
ø11.5 countersink 90°
Cross-recessed flat head screw attachedThe world’s top-level global network
370

240

Following the establishment of MTI Corporation (U.S.) in 1963, Mitutoyo has been expanding its market
presence throughout the world. Currently, the company has R&D, manufacturing, sales, and engineering
service bases in 30 countries, as well as a network of distributors in some 60 countries. Mitutoyo maintains its
rock-solid status as a leading global manufacturer providing services tailored to each regional society.

20.5

240

25 70 25
282
300
342

25

270

25 70
282
300
342

Size 2017
200×170 mm

20.5

Size 4020
400×200 mm

Headquarters

25 70 25
220
450
342
510

25 70 25
220
350
292
410

20-M6 depth 14
ø11.5 countersink 90°
Cross-recessed flat head screw attached

25 70 25
282
300
342

20.5

240

440

25 70 25
220
520

Sales
Research and development facility
392

610

Mitutoyo Europe GmbH

34

Mitutoyo（UK）L.td.

Mitutoyo Asia Pacific Pte. Ltd. Mitutoyo South Asia Pvt. Ltd. Mitutoyo America Corporation Mitutoyo Sul Americana Ltda. Mitutoyo Measuring
Mitutoyo Korea Corporation
Instruments (Shanghai) Co., Ltd.

35

2402(JP19), Printed in Japan

Coordinate Measuring Machines

Vision Measuring Systems

Form Measurement

Optical Measuring

Whatever your challenges are, Mitutoyo
supports you from start to finish.
Mitutoyo is not only a manufacturer of top quality
measuring products but one that also offers qualified
support for the lifetime of the equipment, backed up
by comprehensive services that ensure your staff canmake the very best use of the investment.
Sensor Systems

Test Equipment

Digital Scale and DRO Systems

Small Tool Instruments
and Data Management

Apart from the basics of calibration and repair,
Mitutoyo offers product and metrology training,as well as IT support for the sophisticated software
used in modern measuring technology. We can also
design, build, test and deliver measuring solutions
and even, if deemed cost-effective, take your criticalmeasurement challenges in-house on a sub-contract
basis.

Find additional product literatureand our product catalogue
https://www.mitutoyo.co.jp/global.html
Mitutoyo Corporation
Notes on Export Regulations:
Do not commit an act, which could directly or indirectly, violate any law or regulation of Japan,
your country or any other international treaty, relating to the export or re-export of any commodities.

20-1, Sakado 1-Chome,
Takatsu-ku, Kawasaki-shi,
Kanagawa 213-8533, Japan

Note: Product illustrations are without obligation. Product descriptions, in particular any and all technical specifications,are only binding when explicitly agreed upon.
MITUTOYO and MiCAT are either registered trademarks or trademarks of Mitutoyo Corp. in Japan and/or other countries/regions.
Other product, company and brand names mentioned herein are for identification purposes only and may be thetrademarks of their respective holders.
All product information contained in this brochure is current as of February 2024.

T +81 (0) 44 813-8230
F +81 (0) 44 813-8231
https://www.mitutoyo.co.jp