Sensor Systems

High-accuracy Non-contact In-line Measuring System
Laser Scan Micrometer

LSM-02-A/30-A/CU-A

Catalog No.E13024

APPLICATION

Solutions for high-accuracy measurements ofoutside diameters in the era of in-line inspection

Measurement of catheter and magnet wire

Measurement of roller bearing

Simultaneous measurement of roller outside diameter and deflection

Measurement of film sheet thickness

Our advanced sensor technologies bring new value by helping create a connected
smart factory.

Note: The laser in the picture is for illustrative purposes only.

SYSTEM CONFIGURATION
External equipment (PLC)

USB or
General-purpose Ethernet

LSM Controller
Applications S / W for PC

I / F module LSM Controller
LSM Controller
for in-line

Its thin profile makes it easy to mount on a DIN rail and suitable for installation in a distribution board

LSM Sensor (LSM-02-A / LSM-30-A)

2

3

SOFTWARE ［LSMPAK］

LINE UPLSMPAK helps to ensure intuitive operation of LSMʼs measurement conditions (functions to use,
Go/no-go judgment, etc.), execution of calibration, positioning of a workpiece to measure, etc. It
can also be used to acquire and monitor measured values.

Sensor unit features

Point

1

Wizard instructions
L SM -3 0 -A

L SM - 02-A

• Proven accuracy developed by one of the most trusted
precision measurement instrument manufacturers

2σ
LSM-02-A (ø1 mm): ±0.015 µm
LSM-30-A (ø10 mm): ±0.06 µm• LSM-02-A is equipped with ultra-fine wire measurementmode, capable of measuring outer diameter of 5 µm

• IP67 rated• High-accuracy scanning with a high-accuracy
motor

4 Guaranteed repeatability of

4 Scanning rate:

4 Guaranteed linearity:

Point

LSM-30-A: ±1.0 µm• LSM-02-A has a compact body that can fit anywhere• LSM-30-A is a separable sensor whose emission/reception unit can beused separately

L SM - CU -A

M ea s u re m e n t co n di tio n s s e l e c tio n s c re e n

3,200 scans/s

LSM-02-A: ±0.3 µm

Controller features

Interac tive wizard make s
it quick and ea s y to go
through the s tep s bysimply sele c ting thede sired item s .

Module unit features

I/F module

Ad va n ce d m ea s u re m e n t co n di tio n s
co nfi g u ra tio n s c re e n

2

Guidance function
Simple guidance isprovided to explain
unclear func tions andname s to quickly solve
op erator's problem.
T he func tion also
include s a link to the PDF
file of the u ser's manual
to help ensure quick andcorre c t configuration.
di s p lay s t h e s im p l e
Cli c kin g
g ui d a n ce of ea c h i te m
Di s p lay s t h e u s e r ' s m a nu al P D F• Compact, thin design that fits in a distribution board
or inside equipment

3• Four types of interface are available so that you can selectthe right one to meet your production line requirements

Positioning of a workpiece• Easily mountable on a DIN rail without using a tool
• USB Type-C, I/O ports, and industrial interfaces (optional)• Configuration software included as standard for easy

• The controller design enables insertion of a module without

T he optimum positionof a workpie ce withreference to L SM
c an b e visually andquantit atively confirmed.
This helps to ensure quick
and corre c t positioning ,enabling rep eat able ands t able mea surement .

configuration• The unit can be turned 90 degrees, enabling flexible
layout4

Point

Body including cable can be stored in a 100 mm deep distribution
boardchanging the layout

Positioning by
checking the focus

Be fo re p o s i tio nal a dju s t m e n t

Af te r p o s i tio nal a dju s t m e n t

5■Sensor unit

LSM-02-A

Storage temperature
CE Marking / UKCA Marking
Standard accessory

10.5
17.5
15.5

22.5
41
35

Measuring range

17.5

1

34.5
17.5

126
6.5

3×M4×6

55
29.5

90

Standard: 130 mm, Max.: 350 mm

C to 40 °C, Humidity: 35%RH to 85%RH (non-condensing)
Temperature: 0 °Altitude: 2000 m or less
C to 50 °C, Humidity: 35%RH to 85%RH (non-condensing)
Temperature: -10 °EMC Directive: EN IEC 61326-1,
Immunity test requirements: Clause 6.2 Table 2
Emission limit: Class A
RoHS Directive: EN IEC 63000
Signal cable: 02AGQ190
CD (User's Manual): 02AGQ039

4 3 (Slot depth 4)

ø3 5

6

LSM-30-A
50
22

Unit: mm

ø3

26

*1 When set to "Do not perform ultra-fine wire measurement" or "Edge specification" in the basic setup.
*2 Accuracy was inspected using a glass substrate workpiece with a vapor-deposited chromium pattern.
Environment: Temperature: 20 °C±1 °C, Humidity: 50%±10 °C*3 Value of ±2σ when a ø2 mm/ø1 mm gage is measured for two minutes at measuring intervals of 0.32 seconds (σ: standard deviation)*4 Value of ±2σ when a ø30 mm/ø10 mm gage is measured for two minutes at measuring intervals of 0.32 seconds (σ: standard deviation)*5 Value obtained by measurement at the middle of the measuring range*6 ⊿ D=Difference in diameter between the master gage and workpiece. (Unit: mm)*7 Error caused by moving a workpiece either in the optical axis direction or in the scanning direction*8 When set to "Do not perform ultra-fine wire measurement" in the basic setup, one to eight times of averaging are available within the measuring range of 0.05 mm to 2 mm.

18.5

Operating environment

ー

181
105.5

23.5

Measuring region
Number of scans for averaging
Laser Class
Scanning rate
Laser scanning speed
Protection level
Distance between the emission unit andreception unit

70 or more
(Cable space)

40
19.5

22.5

Positional error*2*7

20.5

14.5

Linearity*

ø3 4

9.5
17.5

2

0.01 µm
ø 30 mm: ± 0.09 µm*4
ø 10 mm: ± 0.06 µm*4
Whole range: ± 1.0 µm*5
± 0.3 µm*5
Narrow range: ± (0.6+0.1 ⊿ D) µm*5*6
Full range (10 × 30): ± 1.8 µm± 0.4 µm
Middle range (5 × 20): ± 1.0 µm
1 × 2 [optical axis depth] × [scanning width] mm
10 × 30 [optical axis depth] × [scanning width] mm
1 to 2048 scans
16 to 2048 scans *8
Semiconductor laser: CLASS 1 (Max. output: 1.0 mW, Laser wavelength: 650 nm)
3200 scans/s
76 m/s226 m/s
IP67

2

Full range
Middle range

32.5
57.5
84

Repeatability (2 σ)*

20.3 to 30 mm(R)

Resolution

544-124
LSM-30-A

28

Measuring range

544-123
LSM-02-A
0.005 to 2 mm
0.05 to 2 mm*1
0.01 µm
ø 2 mm: ± 0.03 µm*3
ø 1 mm: ± 0.015 µm*3

Unit: mm

11 11

4×M3×6

56

Specifications
Code No.
Model

8×M3

355

70 or more
(Cable space)

170

42
21 21

108

57.5
5.8

18

12

90

30

80

90.3

64.5

10

42
6

25.8

33.5

50

6
Measuring
range

56.8

55

130
80

24 18

4.5

95.5

65.5

3×M4×8(same in the back)

4.5

4.5

46

2×M4×8(same in the back)

3

36

3

8×M3

38

20

239

20

38

* Extendable up to 277 mm
ø3 5

9.5

3 (Slot depth 4)

9.5

41

7
8

3×M4×8ø3 5

3 (Slot depth 4)

23.5

14.5

3×M4×8

23.5

4

57*

4

18.5

8

18.5

90

150

9.5

10

Separated

6

7

■Controller■Interface Unit

Specifications

Specifications

Standard accessory*1 Each function has its combination limit.
*2 Use an AC adapter/switching power supply with output of at least +24 V/3.0 A.
Reference AC adapter: Signcomplex / AC adapter 24V / 3A DC Port diameter 5.5×2.1 mm, Power supply connector: KAUMO Co.,Ltd. / Power supply connector O.D. 5.5 mm I.D. 2.1 mm
Switching power supply: OMRON Corporation / OMRON S8VS-12024■Controller■Interface Unit

LSM-CU-A

LSM-EI-A
61.5

168

Specifications

Specifications

Code No.
Model
Communication standards
Interface

Ethernet
communication

LED
RJ45 connector
Communication port
Communication speed
Cable used
PROFINET RT

PROFINET function

Min. cycle time
Maximum number of connections(ARs*1)
Number of CRs*2 per connected
controller

02AGQ350
LSM-PN-A
PROFINETRUN Indicator: Dual Color LED1 (red/green)
ERROR Indicator: Dual Color LED1 (red/green)
2 channels
RJ45 × 2
100 Mbps Full duplex
Cat.5e or more STP cable
Conformance class B PROFINET device
Media redundancy protocol (MRP) client
Multicast provider and subscriber
2 msec

9.5

140
159

LSM-CC-A

28
14
9.5
112.5

10

RJ45 connector
Communication port
EthernetCommunication speed
communication
Cable used

140
159

LSM-EC-A

02AGQ300
02AGQ370
LSM-EI-A
LSM-EC-A
EtherNet/IP
EtherCAT
NETWORK STATUS Indicator: Dual Color LED1 (red/green)
RUN Indicator: Single Color LED1 (green)
MODULE STATUS Indicator: Dual Color LED1 (red/green)
ERROR Indicator: Single Color LED1 (red)
2 channels
RJ45 × 2
100 Mbps Full duplex
Cat.5e or more STP cable

Unit: mm

28.3

47.4

Interface

LED

2.5

Unit: mm

9.5

■Interface Unit
Code No.
Model
Communication standards

LSM-PN-A

Unit: mm28
14

CE Marking / UKCA Marking

10

Storage temperature
Mass

CE Marking / UKCA Marking

47.4

Operating temperature

Temperature: 0 °C to 50 °C, Humidity: 20%RH to 85%RH (non-condensing)
C to 50 °C, Humidity: 35%RH to 85%RH (non-condensing)
Temperature: -10 °EMC Directive: EN IEC 61326-1,
Immunity test requirements: Clause 6.2 Table 2
Emission limit: Class A
RoHS Directive: EN IEC 63000

Operating environment
Storage temperature

28
14Power supply

Common specifications

140
159

9.5

140
159

10

Standard I/F

CC-Link IE TSN
function

47.4

Indicator
Signal cable connector
USB connector
I/O connector
Power supply connector

Ethernet
communication

28
14

Functions10

Measuring functions *RJ45 connector
Communication port
Communication speed
Cable used
CC-Link IE TSN
Min. cycle time

47.4

1

LED

Interface

69.5

Segment mode
Edge mode
Averaging method

02AGQ390
LSM-CC-A
CC-Link IE TSND Link: Dual Color LED1 (red/green)
ERROR: Single Color LED1 (red)
2 channels
RJ45 × 2
100 Mbps Full duplex
Cat.5e or more STP cable
Class A remote station
1 msecCode No.
Model
Communication standards

100

Model

544-120 (metric)
544-121 (mm/inch switchable type)
LSM-CU-A
1 to 7 (1 to 3, transparent)
1 to 255
Arithmetic average: from 1 to 2048, Moving average: from 32 to 2048
Transparent object measurement, Ultra-fine wire mode (LSM-02-A only),
Simultaneous measurement of two items, Automatic workpiece detection, Outlier elimination,
Judgment (lower limit/upper limit, multi-limit tolerance zone, target value and tolerance value),
Dirt detection for protective glass, Sample measurement, Analog output,
Parameter setting (Measurement condition): 20, Workpiece position, Calibration, Presetting, Offset,
Statistical analysis, Calculation of two or more sets, Sensor model identification［POWER］LED (green),［ERROR］LED (red）Mini D-Sub (15 pins)
Type-C
Separate terminal block (18 pins)
Separate terminal block (6 pins)
DC+24 V ± 10%, 3.0 A or more *2
Temperature: 0 °C to 50 °C, Humidity: 20%RH to 80%RH (non-condensing)
Altitude: 2000 m or less
C to 60 °C, Humidity: 20%RH to 80%RH (non-condensing)
Temperature: -10 °Approx. 550 g
EMC Directive: EN IEC 61326-1,
Immunity test requirements: Clause 6.2 Table 2
Emission limit: Class A
RoHS Directive: EN IEC 63000
Socket for I/O terminal block: D800-396, Socket for power supply terminal block: D827-827
Grounding wire (4 m): 02AGQ068
CD (LSMPAK installer, User's Manual): 02NGA070

48

Code No.

■General Notes
Compatibility
LSM-02/30-A sensors and LSM-CU-A controller are not compatible with conventional models (LSM-3000/3100/4000/4100/400 Series, 5000/5100/5200/6000/6100/6200/500 Series, 500H Series, and 500S Series).

The workpiece and measuring conditions
Measurement error may occur depending on the shape or surface roughness of the workpiece. In this case, be sure to perform calibration using a reference gage or master gage that has a known shape or the same
surface roughness as much as possible. If measurement values show a large degree of dispersion due to the measuring conditions, increase the number of scans for averaging to improve the measurement accuracy.

Electro magnetic interference
To avoid operational errors, do not route the signal cable and relay cable of the Laser Scan Micrometer alongside a high voltage line or other cables capable of inducing noise current in nearby conductors. Ground all
appropriate units and cable shields.

Safety precautions regarding laser beamThis product uses a low-power visible laser for measurement and classified as a CLASS 1 laser product according to EN/IEC 60825-1. On LSM-02/30-A sensors, a CLASS 1 laser safety label as shown below is attached.

2
For cyclic data: 2, For parameter setting: 1*1 AR: Application Relation, Type of AR: Device Access*2 CR: Communication Relation

8

9

OPTIONS
Standard calibration gage set

Workstage

Extension signal cable/Extension relay cable

These are standard gages for calibrating laser scan micrometers.
The dimension to be calibrated is one direction at one point which is marked on each gage.

This enables highly accurate measurement thanks to easy setup andheight adjustment of shafts, etc.

These cables are used when the measuring unit and display unit are placed far
apart during use (extension signal cable) or when the emission unit and reception
unit are placed apart during use (extension relay cable).

ø 0.1

ø2

ø1

25
34

127.8

Emission
Unit

Reception
Unit

Extension relay cable

Relay cable (0.5 m)
LSM-30-A only25

Code No.
02AGN780A
02AGN780B
02AGN780C
02AGN780D

6
Center of measuring stroke: 57.5

ø 10Line indicating themeasuring direction

90(Vertical stroke: Approx. 56 mm)

ø 10

ø 10

Extension signal cable

Vertical motion handle

96

5

ø 30

ø2

Calibration gage

22

stroke: 22.5

ø 2 (Center support hole)5

Extension
signal cable10.5 15.5 Center of measuring

Unit: mm

36

14

13

22

5

21

Calibration gage

ø 0.1

5

20.86

Calibration gage

Unit：mm

Display
unit

Unit: mm4×Hex-socket head screw (M3)

LSM-30-A

ø 10

LSM-02-A

ø1

Carrying caseSignal cable (5 m) 02AGN770A

Calibration gage mounting hole

22

Gages

LSM-30-A
02AGD270

Model
Code No.

14

Configuration(Code No.)

21

Stand

LSM-30-A
02AGD130
02AGD131
ø1 : 02AGD920
ø30: 02AGD961
02AGD980

Center of measuring stroke: 31

LSM-02-A
02AGD110
02AGD111
ø0.1: 958200
ø2 : 958202
958203For calibrating models
Set No.

Emissionunit side

ø 30

50

Reception
unit side

12

Extension relay cable

Cable length
5m
10 m
15 m
20 m

Code No.
02AGQ464A
02AGQ464B
02AGQ464C

Cable length
1m
3m
5m

Note1: For LSM-02-A, the signal cable should be 20 m max. and the relay cable 2 m max.
Note2: For LSM-30-A, the signal cable should be 29 m max. and the relay cable 5 m max.
Note3: The total length of a signal cable and relay cable should be 29 m max.

44
62
66

Wire guiding pulley
Adjustable workstage (for LSM-30-A)
Object(Measuring range: ø 0.1 to ø 1.5)

12.5 12.5

Use a calibration gage set (02AGD110) for
LSM-02-A for any workpiece if calibration isnecessary.

8

11Center of measuring
stroke: 15.5

(28)

The measuring range is as below.
LSM-02-A: ø 0.1 mm to ø 1.5 mm
To measure a workpiece smaller than ø0.1 mm orlarger than ø1.5 mm, contact one of our sales orcustomer service representatives.

10.5 15.5

ø 13
2×
Hex-socket head screw (M3)

38

19.5

Center of measuring
stroke: 25（26）

Emission unit side

Air shield

Code No.
Measuring range
Horizontal stroke
Vertical stroke
Maximum loading
mass
Mass
Standard
Accessories
Optional
accessories

02AGD490
0.3 to 30 mm
200 mm35 mm

Slide table

2.0 kg
4.9 kgV-block (02AGD420) × 2
Stop (02AGD430) × 1
Center support (02AGD440)
Adjustable V-block (up/down) (02AGD450)

Unit: mm2×Hex-socket head screw (M4)
Laser emission port

LSM-30-A
02AGQ450

Air tube
40.5
44

6.5

54.5

12

ø10:CAL Gage mounting hole

V-block

Coaxial stepped workpieceøDø10:CAL Gage mounting hole

6

ødøD

6

ød

51

H

Coaxial stepped workpiece

H

Laser beam stabilization shield
This suppresses variation of measured values caused by spatial fluctuation of the measurement environment.

Model
Code No.

Center of measuring
stroke: 90

L2

L1

L2

L1

LSM-30-A
02AGQ452

Unit: mm

Code No.
Workpiece diameterø DmaxSpigot diameterø dmax（øD-ød）max
Mass
Remarks

Unit: mm2×Hex-socket head screw (M4)
Laser emission port

44.2

35 35

38
46.5
51
62

42
5

10

LSM laser reception

02AGD420
30 mm
30 mm
25 mm
0.03 kg (Weight per unit)
Supported CAL gagesø 1 (02AGD920)
ø 10 (229317)
ø 25 (02AGD963)
ø 30 (02AGD961)

Stop
Unit: mm

16

Center of measuring stroke: 300

Vertical motion handle

Adjustable workstage Standard Accessories (for LSM-30-A)

69.5

21.5

LSM laser emitter

300

62

38

46.5

42
31

6

26

Range of motion: 505 or less (Horizontal stroke: 200)

11

Flow control coupling

Note: A 5 m air tube (with ø6 mm outer diameter) is included with the air shield.

Vertical clamp

Horizontal clamp（178）

If the emitter and receiver windows are clouded with smoke or dust, it can be prevented by blowing clean air from air outlets at the emitter and receiver.

Model
Code No.

Unit: mm460

180

Calibration gage mounting hole

The mechanism allowing vertical and horizontal sliding helps to ensure easy outside diameter measurement ofvarious workpieces. It is useful for quality control of precision shafts, rollers, and pin gages.

Vertical stroke:35

Center of measuring stroke: 16.5

167

LSM-02-A
02AGD200

24.5

Model
Code No.

Unit: mm

Reception unit side

Center of measuring stroke: 97.5

Used for supporting measurement of outside diameter of fine wire-like materials such as magnetic wire or fiber.

14
18.4
28

10

20

27

20

27
L3

L4

L3 A以上ストローク

Code No.
Mass
Application

02AGD430
0.05 kg
Positioning of workpiece112307(JP1) Printed in Japan

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basis.

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All information contained in this brochure is current as of July 2023.

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