TOKYO ELECTRON ANNUAL REPORT 2014

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CONTENTSCONTENTS

Financial Highlights

Business Overview

Talking about
Tokyo ElectronTop Message

Review of Operations
and Business Outlook

Corporate GovernanceCorporate Citizenship

R&D / Intellectual Property

Financial Section

Corporate Data

Environmental, Safety and Health Activities

Environmental, Safety and Health Activities
Tokyo Electron positions environmental, safety and health activi-will continue to obtain ISO 14001 certification for the Group’sties as one of its most important management issues to achieve

plants, implement environmental education, and begin activities toboth sustained corporate growth and a sustainable society. The

protect biodiversity, among other environmental activities.

Example of efforts to reduce products’ environmental impact

more of waste. All overseas facilities that set targets achieved them.

Plasma Etch System

Group is committed to reducing the environmental impact of all its
activities, and to ensuring absolute safety in the Company’s facili-

Environmental Activities
Under the slogan “Technology for Eco Life,” the Tokyo ElectronGroup aims to use cutting-edge technologies and services toactivities in line with the green procurement guidelines, implemented online environmental education in overseas areas andconducted activities based on the guidelines concerning biodiversity adopted in fiscal 2013.

Plasma Etch SystemTactras™ Vigus™

solve environmental problems. In all its business activities, theIII. Other Activities
The Group surveyed business partners about their environmental

A 50% reduction in energy usedper wafer by Tactras™ Vigus™
was achieved by reducing theenergy consumed by the high frequency generator (plasma generation) and the chiller (temperaturecontrol), which are major consumers of electricity in the system.

ties and in those of its customers.	Domestic plants and offices achieved the goal of recycling 97% orTokyo Electron will continue to promote further activities andimprovements globally in fiscal 2015.

Group aims to reduce environmental impact and preserve theglobal environment, while also conducting activities aimed at conResults of the Fiscal 2014 Environmental Goals

serving biodiversity. In these ways, the Tokyo Electron Group isSafety and Health Activities

Environmental goals and the corresponding results for fiscal 2014

Tokyo Electron gives top priority to the safety and health not only

are as follows.

of our employees but also of our customers and business part-I. Products

ners and conducts various safety activities. The Company pro-

Under the Environment Vision, in fiscal 2012 we set environmental• Reducing environmental impact

motes safety and health in all of its operations, including offering

goals in the four areas of products, procurement and logistics,	The goal of reducing power consumption by 50% (from the fis-ongoing safety education to employees and partner companies,

plants and offices, and environmental management. In products,cal 2008 levels) for the major models in each business unit wasdesigning products with an emphasis on safety and operating

our target has been to reduce the power consumption of majorachieved in fiscal 2014, a year ahead of schedule.

factories with consideration for the environment.

contributing to the creation of a sustainable world.
Goals Based on the Environment Visionmodels of each business unit by 50% and promote the environ-• Product environmental compliancemental compliance of products. In procurement and logistics, we	In addition to activities to reduce the use of hazardous sub-place accidents by 20% compared with the previous year.* Tokyo

are promoting green procurement and modal shifts. In plants andstances*, Tokyo Electron continued to assure compliance withElectron also carried out activities in line with its important goal ofoffices, we aim to reduce energy and water consumption andenvironmental regulations.

preventing accidents that lead to serious injuries or death. As apromote the recycling of waste. In environmental management, weGoal

Environmental
management

Plants and offices

Procurementand logistics

ProductsReduction of environmental impact

Status in fiscal 2014
Reduced power consumption of major models of each business unit by 50% from the fiscal 2008 levels
ahead of schedule in fiscal 2014.

Compatibility with Chinese RoHS

Began activities aimed at compatibility with Chinese RoHS at overseas production bases.

Voluntary compliance with the EU’sRoHS

Continued to ensure that major models of each business unit contain 98.5% or more parts that meet the EU’s
Restriction of Hazardous Substances Directive (RoHS).

Compliance with environmental regulations of each country

Continued to ensure product compliance with the EU’s Registration, Evaluation, Authorization andRestriction of Chemicals (REACH) framework as well as with labeling requirements based on the Globally
Harmonized System of Classification and Labeling of Chemicals (GHS) and battery regulations of each country. Reinforced overseas compliance systems.

Promotion of Green Procurement

Surveyed approximately 300 major business partners to understand the status of their environmental initiatives.

Reduction of environmental impactof logistics

Promoted modal shifts, continued monitoring.

Reduction of energy consumption
by 1% year on year

Nine of 14 global locations that set targets achieved them.

Recycling of waste (maintain domestic
recycling ratio at 97% or higher)

Achieved domestic recycling ratio of 98%. Overseas locations that set targets achieved them.

Reduction of water consumption(maintain fiscal 2012 level)

Achieved 11 of 18 targets set at global facilities.

Environmental management system

Maintained ISO 14001 certification for the Group’s plants.

Environmental education

Conducted environmental education overseas. Including those in Japan, approximately 10,000 participants
have received environmental education since fiscal 2013.

Environmental communication

Continued to publish Environmental and Social Reports.

Conservation of biodiversity

Held multiple ecosystem observation events at all domestic locations based on our activity guidelines.

* In Japan, substances regulated in the Act on the Evaluation of Chemical Substancesand Regulation of Their Manufacture, etc., the Industrial Safety and Health Act, and
the Poisonous and Deleterious Substances Control Act.
Outside Japan, substances regulated by RoHS, REACH, etc.

In fiscal 2014, Tokyo Electron reduced the number of work-result, the number of such accidents was also reduced by 40%
compared with fiscal 2013. The Company continued to implement accident prevention measures such as prior safety checksof installation areas, risk prediction activities at work sites, safety

II. Plants and Offices

patrols and other on-site activities, as well as case studies of• Reducing energy use

actual accidents. The Group is furthermore implementing various	Nine of 14 global locations achieved goals to reduce energy

ongoing activities to prevent the reoccurrence of accidents

consumption by 1% on a per-unit basis in each area. The

caused by human error, including analysis of accident causes andGroup’s fiscal 2014 CO2 emissions as defined by scope 1 andappropriate countermeasures.

scope 2 of the GHG Protocol were 157,360 tons.

Tokyo Electron has built its world class safety systems one• Reducing water use

piece at a time through tireless safety initiatives. The Group will	Under the overall goal of maintaining fiscal 2012 usage levels

continue to make every effort to maintain and strengthen this sys-

on a per-unit basis in each area, global facilities achieved 11 of
18 specific targets set.

tem going forward.
*	Like for like basis excludes accidents at the four subsidiaries acquired in fiscal 2013
and traffic accidents among the Group.

• Recycling of waste

For further details, see the “Tokyo Electron
Environmental and Social Report 2014”(to be published in July 2014).

Meeting on implementation of new
guidelines for the use of chemicals inproducts

Ecosystem observation event