TOKYO ELECTRON LIMITEDANNUAL REPORT 06

ENVIRONMENTAL, HEALTH AND SAFETY ACTIVITIESAs a business enterprise, Tokyo Electron has an important mission:to give top priority to people’s health and safety and consider
environmental protection in the conduct of its business activities.

Fundamental Policy
Tokyo Electron positions environmental, health and safety activities as one of its most important management issues to achievesustained corporate growth and continued development ofsociety. With that in mind, Tokyo Electron is committed to reducing environmental loads across its activities, and to ensuring
absolute safety in the Company’s business premises and in thoseof its customers.
Tokyo Electron embodied these commitments in “TEL’s Credoand Principles on Environmental Preservation” and “TEL’s Safetyand Health Credo and Principles” formulated in 1998. Bothstatements were reviewed and revised in May 2006 in light of thedirection the business is taking and the Company’s evolving
approach to these issues. The recent revisions clarify a road map
for environmental protection measures in product development;
they mandate evaluation of environmental issues in the design,
manufacture and utilization of our products, and disclosure ofinformation to stakeholders through the publication of environmental and other reports.

EHS ManagementSince 1997, Tokyo Electron has developed and implemented
environmental management systems based on ISO 14001 standards, mainly for manufacturing operations, and obtained suchcertification. In fiscal 2006, Tokyo Electron Kyushu Limited completed integration of ISO 14001 certification for four plants: Saga,Kumamoto, Koshi and Ozu, which had already been certified.

Adoption of Environmental Accounting
Tokyo Electron has introduced an environmental accounting systemthat quantifies the cost of its activities in respect of environmental
protection, and uses this as the basis for developing corporate
action policies. For more information on achievements in fiscal
2006, please see the “Environmental and Social Report 2006” to bereleased in September 2006.

Company/plantTokyo Electron AT Limited
Tokyo Electron FE Limited
Tokyo Electron Tohoku Limited
Tokyo Electron Kyushu Limited
Tokyo Electron AT Limited
Tokyo Electron Device Limited

Environmental Activities With Regard to Products
Proactive Environmentally Conscious Product Design
As clearly set forth in our revised TEL’s Credo and Principles on
Environmental Preservation, Tokyo Electron believes that promotion of product designs sensitive to the environment is vital.
Tokyo Electron has positioned promotion of energy conservationin its products, and reduction and replacement of hazardous
chemicals in its products as priority issues.
1. Energy Conservation During Equipment Use
Since many of our products are manufactured and used in clean
rooms, we take an all-inclusive approach that factors in theenergy conservation aspect of the entire system, including theequipment and the clean room. The five major targets in thisrespect are as follows:
1. Reduce energy consumption of the equipment itself
2. Reduce energy consumption of peripheral devices
3. Use equipment in ways that conserve energy
4. Reduce energy consumption of the clean room
5. Overall clean room management (planned andappropriate operation)
Tokyo Electron played a central role in developing the 2005
SEMI S23 Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment that wasadopted as the global standard by the semiconductor industry.
2. Hazardous Substances in Products
Growing out of the concern that hazardous substances in partsand materials could affect the environment and the ecologicalsystem, regulations restricting the use of such substances in
automotive and electrical products are being tightened throughout
the world. The European Union’s WEEE*1 and RoHS*2 directives
and the China RoHS directive*3 are of particular interest to theelectronics and related industries. These directives will have animpact on the products manufactured by Tokyo Electron. Tokyo
Electron Group is thus responding proactively by taking measureson hazardous substances in advance of regulatory requirements.
*1 Waste Electrical and Electronic Equipment*2 Restriction of the Use of Certain Hazardous Substances in electrical and electronicequipment*3 The official name of the Chinese version of RoHS is Measures to Control Pollution From
Electronic Information Products

Sagami Plant

Plant

Certification date
December 10, 1997

Certification number
1110-1997-AE-KOB-RvA

Tohoku Plant
Kumamoto/Koshi/Ozu/Saga plants
Yamanashi Plant (Fujii/Hosaka area)
Miyagi Plant
Yokohama OfficeFebruary 19, 1998
March 26, 1998
May 15, 1998
March 1, 2005
July 14, 2004

1118-1998-AE-KOB-RvA Rev.2
1120-1998-AE-KOB-RvA Rev.2
1124-1998-AE-KOB-RvA
01245-2005-AE-KOB-RvA
EC04J0144

16

TOKYO ELECTRON LIMITEDANNUAL REPORT 06

Health and Safety Activities

Targeted Hazardous Substances
Priority 1 substances■ Cadmium: pigments, stabilization agents, resins■ Hexavalent chromium: chromium plating■ Lead: solder, paints, electrical wire insulation, free-cutting metals■ Mercury: batteries, fluorescent lamps■ PBBs: resin parts■ PBDEs: resin parts

Priority 2 substances
JIG Level A designated substances (includes many substances
for which measures are already in place)
JIG: Joint Industry Guide. The JIG is a list of chemicals that require
countermeasures, prepared jointly by U.S., European and Japa-Tokyo Electron promotes health and safety in all of its operations.
This includes giving top priority to the health and safety of ouremployees and customers, and designing products with safety inmind. TEL’s Safety and Health Credo and Principles clearly statethat all employees are responsible for being constantly aware ofhealth and safety considerations in all their business activities.
The Company held six safety training programs for top management at group sites in fiscal 2006, with the participation of executive officers and other employees, including those of affiliates.
The program was divided into theory, practice, and discussion.
The theory included such topics as the importance of systematic
approaches to the human risk factor and risk management.
The practice section included reports from sites and on issues
from the standpoint of safety. The discussion session debatedhow best to establish a culture of safety at Tokyo Electron.

nese private-sector organizations. The substances are classified
as Level A or Level B. The Level A list contains 16 substances,such as cadmium, hexavalent chromium, lead, mercury, PBBs,and PBDEs. The Level B list contains more than 400 substances.

This section only discusses some of Tokyo
Electron’s environmental, safety and healthTokyo Electron group has established an Action Team for
Substances Contained in Equipment comprised of representativesof manufacturing divisions. The goal is to share necessary information, seek active cooperation from suppliers, and investigate
composition and to find and promote substitutes.

activities. For further details, see“Environmental and Social Report 2006”(to be published in September 2006).
URL: http://www.tel.com/eng/about/ehs/
ehsreport/ehsreport.htm

TOPICS
control of exhaust air during standby (to reduce the load on
Approach to Reducing Environmental Burden in
the air conditioner of the clean room), shortening of the cleanNew Products
ing time with pure water, and cleaning with a lower-power unit.
Tokyo Electron is reducing the environmental burden in eachtype of equipment it produces, as appropriate for the environmental characteristics of the equipment. The auto wet station,
one of our main products, uses a large volume of pure water
during the processes to remove dust and contamination
Reducing pure water usage during standby(%)
adhering to the wafer surface. Reducing this consumption was
one of the goals during the development of the new auto wet 100
Approx. 15% savings
station EXPEDIUS. A new water-saving specification has been
set for the supply flow during standby, which reduces water
consumption by 15% compared tothe previous model. Next, a valve wasApprox. 70% savings
added to the pure water supply line toprovide intermittent supply, and thisallowed a 70% reduction compared0to earlier models. Other new features
Earlier model
Water-conserving
Intermittent supply
we are working on at present are
specification
EXPEDIUS17