July 20, 2020
Tokyo Electron Limited
EHS Promotion Center

Green Procurement Guidelines
As global environmental issues have been becoming a greater concern, Tokyo Electron Group has been
conducting business operations based on its environmental policy, which aims to conserve the global
environment and create a recycling-oriented society.
In order to develop an environment-conscious manufacturing system, it is essential that the impact the partsand devices that comprise products have on the environment is reduced to a minimum. Furthermore, onJanuary 15, 2001, Tokyo Electron Group issued "Green Procurement Guidelines" to ensure that its green
procurement processes, which include activities to help suppliers reduce environmental load, are correctlyimplemented.
Looking at every area of this planet and considering the fact that laws and regulations concerning
environmental conservation have become increasingly comprehensive in terms of both depth and scope, wehave concluded that we need to revise the "Green Procurement Guidelines". The aim of this revision is toaccelerate our compliance with applicable laws and regulations.
Tokyo Electron Group will strive to continue and develop our sustainable global environmentalconservation activities. We would like to ask every supplier to understand these guidelines and provide us
with your kind cooperation.

Our Approach toward the Environment
Based on our slogan, "Technology for Eco Life", Tokyo Electron Group aims to help solve
environmental issues by providing leading-edge technologies and services. We aim to reduce
environmental load and preserve the global environment through all our business activities.
We also promote environmental activities in consideration of biodiversity in order to help
create a sustainable society.

11. Development of an environmental management system
Using ISO 14001 (Environmental Management System) and "Environmental Activity Evaluation
Program" as references, develop an environmental management system that ensures corporate-basedsustainable global environmental conservation activities.
◆ In general, the following activities should be promoted to develop an environmental management
system:(i) Develop a corporate credo concerning global environmental conservation.
(ii) Appoint an executive officer, dedicated organization, committee, and other people in chargeof promoting environmental conservation so that the system can be operated accordingly.
(iii) Understand the environmental loads (emissions of chemical substances and waste, energy
consumption, etc.) caused due to business activities.
(iv) Implement management systems that continuously reduce environmental loads, and thatobserve environment-related laws, regulations, and local ordinances.
(v) Disclose information related to environmental conservation.
(vi) Provide enlightenment and education related to the environment.
(vii) Undertake biodiversity conservation activities.
(viii) Run a green procurement system.
◆ The "Environmental Activity Evaluation Program", formulated by the Ministry of the Environment,provides simple methods that Japanese business operators can use to voluntarily "be aware of theirrelationship with the environment, set a goal, and start an action". The environmental activity
evaluation program, called "EcoAction 21", is available at the following URL of the Ministry of theEnvironment.
https://www.env.go.jp/policy/j-hiroba/kigyo/EA21_2017%20English.pdf

2. Understanding and reducing environmental impact due to business activities, anddisclosure of related information

Business operators should be conscious of a broader range of environmental issues. Tokyo ElectronGroup is also expected to consider how to reduce environmental loads generated by our suppliersand customers, as well as those generated as a result of our own business activities.
Environmental loads can be seen in a wide range of aspects including resource and energy
restrictions, changes in climate, water pollution, chemical substance control, air pollution, forest
preservation, and biodiversity conservation. All of these have varying impacts on the environment.

We would like to ask you to understand and reduce the environmental impact resulting from yourbusiness operations. Tokyo Electron Group may ask you to provide information about environmental
activities and impacts related to your business activities. Your cooperation would be appreciated.

3. Environment-conscious measures on products(1) Delivery of gases or chemical products Apply necessary labels and attach safety data sheets (SDSs). Labels and MSDSs should be written
in the local language of the country or region where our customer or we will carry out businessactivities. Depending on the chemical product, you may be asked to provide a JAMP MSDS plus.
(2) Measures related to chemical substances contained in components, parts, materials, or chemical
products used for maintenance Please implement necessary measures based on our list of substances that are prohibited, restricted,
and that must be controlled. Also, please provide necessary information in the specified format
together with the products delivered to us.

2(3) Measures related to chemical products incorporated in components or parts
 Transportation of a device incorporating a chemical product may be subject to a relevant
regulation(s). When delivering a component or part that incorporates a chemical product(s),indicate the name(s) and total weight of the chemical product(s), and safety measures provided forthe device.
(4) Information on built-in batteries of components or parts
 Built-in batteries refer to batteries that were built into components or parts during yourmanufacturing process, and those that had already been built into components or parts before you
procured them. When delivering a product that contains a built-in battery, provide information suchas the names of countries the product can be used in and the product specifications, and also
implement labeling that is required in the relevant country.
(5) Energy-saving and high energy efficiency measures Strive to develop energy-saving products. Aim to reduce standby power consumption as much aspossible.
 Some electrical appliances have already been subject to laws and regulations that stipulate theenergy efficiency level, and these regulations are considered to become applicable to more types ofappliances. Products that you procure from your suppliers may have already been included in thelist of controlled items. Provide your written judgment regarding the product's compliance ornon-compliance with the laws and regulations applicable in the country or region we arereferencing. If you consider that the relevant product does conform, present a certificate ofconformity or documented conformity plan.
(6) Saving, reusing, and recycling resources Strive to reduce the size and weight of products, and the amount of materials to be used.
 Select and use materials that can be easily recycled.
 Strive to reduce the number of types of materials, and to employ a structure that enables theproduct to be easily disassembled.
 Indicate the recyclability information of as many materials as possible.
(7) Packing
 Use reusable packing materials, and collect and reuse them as much as possible.
 Use packing materials made of substances that have the smallest possible impact on the global
environment after they are disposed of.
 Provide information as to whether the packing materials comply with the laws and regulations
applicable in the country or region we are referencing.
(8) Provision of information
 We may ask you to provide us with environment-related information about your products. Pleaseprovide as much information as possible.
Scope
These guidelines are applicable to companies that manufacture components, parts, or materials wepurchase, companies that assemble units or assemblies we use to manufacture our products, andcompanies that provide distribution or other services.
Other notes
These guidelines are subject to revision to reflect changes in social situations and legal trends.
Contact
Tokyo Electron Limited
EHS Promotion Center
30-7 Sumiyoshi-cho 2-chome, Fuchu City, Tokyo 183-8705
Phone 042-333-8252 Fax 042-333-8477
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