Health, Environment and Safety

Commitment and Priorities
We believe that, as a business enterprise, Tokyo Electron has an important mission to fully
consider environmental protection in its business activities, giving top priority to people’s
health and safety.

Activities to Reduce Environmental Impact
LCA Initiative
We use Life Cycle Assessment (LCA) to quantitative assess a product’s environmental impact during
the course of its life at each stage: from raw materials through manufacture, transport, use, and disposal. For equipment with particularly significant impact on the environment, we analyze energy
consumption into components, such as ultrapure water, electricity, and gas emissions. This analysis
is applied to improving equipment or developing new products.
Green Procurement
We source almost all our materials and parts for the manufacturing of semiconductor manufacturing
equipment from suppliers. To effectively use “Green procurement” to source materials in a mannerthat reduces environmental impact, therefore, it is essential to have the cooperation of suppliers. To
promote their cooperation, the TEL Group issues a Green Procurement Guideline, distributes it tosuppliers throughout Japan, and holds green-procurement seminars. We are actively working tointroduce trainer education programs to help educate suppliers about green procurement as well as
produce other educational systems.

Chemical Substance Management
Semiconductor manufacturing processes utilize a variety of chemical substances that could cause
environmental pollution. To prevent any environmental pollution resulting from the use of thesechemical substances, the TEL Group manages them strictly, including introduction, application anddisposal, taking the environment and employee safety in account. Before any of our operations
introduce new chemicals, they do appropriate research, determine standards for proper handling,
and make efforts to substitute or reduce the use of harmful substances.
Environmental Accounting
Environmental accounting is a tool for ascertaining the cost and effect of a company’s environmental activities for use within the company’s routine operations. As a Group, we have been using environmental accounting since the fiscal year ended March 2001. The results for the fiscal year underreview will be available in the Environmental Report 2003, which will be published in fall 2003.

Safety Activities
We give top priority to the safety and health of our employees, customers, and everyone involved
with the TEL Group’s business. This commitment is evident in the TEL Group Credo and Principles onEnvironment, Safety and Health, which were first set out in 1998. These guidelines clearly state thatemployees are responsible for being constantly aware of safety and health considerations in each andevery business activity. To ensure thorough compliance with these guidelines, the TEL Group has
developed a safety training program. All employees—office and plant workers alike—including thoseemployees of supplier companies are required to take courses in basic safety measures. We require
employees with greater responsibility or more dangerous jobs to take higher level courses.

16

Annual Report 2003 — Innovations Ahead