August 30, 2021
ADEKA CORPORATIONADEKA to Expand Production Capacity for Photoacid Generators for
Cutting-Edge Photoresists at its Chiba Plant
ADEKA CORPORATION (President and Chief Executive Officer: Hidetaka Shirozume) has
decided to expand production capacity for Photoacid generators used for the cutting-edge
lithography process of semiconductors, including extreme ultraviolet (EUV).
The Photoacid generator ADEKA ARKLS series has enjoyed favorable sales, driven by theemergence of 5G communications, lifestyle changes such as teleworking, and the upsurge indemand for semiconductors. ADEKA ARKLS series boasts the world's top performance,characterized by fine patterning and low metal control at the level of parts per billion (ppb).
The use of EUV exposure, the latest lithography technology, is expected to grow withadvances in the refinement of semiconductors. Technical innovation is required for thePhotoacid generators for the old lithography. ADEKA is investing in state-of-the-art
equipment that materializes low metal control of less than 1 ppb to accelerate the provisionof products for EUV. The conventional technology is not capable of realizing low metalcontrol at that level. Using the production
equipment to be introduced, we plan to produce
peripheral materials for semiconductors that
become needed as refinement advances.
ADEKA will contribute to realizing an ICT
society by providing cutting-edge semiconductor▲ Chiba Plant viewmaterials.

◆ Outline of Expand Production Capacity
Location

Chiba Plant: Sodegaura shi, Chiba pref. JAPANInvestment value

2.7 billion yen

Total floor area

1,698 ㎡ * Newly established from the current 280 ㎡

Production capacity

At least twice the conventional capacity

Schedule

Construction commencement：March 2022
Commencement of commercial operation: Within FY2023〈Continued on the next page〉

Supplementary notes:
1: About ADEKA ARKLS series, ADEKA photoacid generator
ADEKA ARKLS series is the initiator for photoresists. The product is used to generate acids
through reaction to specific light and electron rays to realize fine patterning in thesemiconductor lithography process.
The use of cutting-edge lithography: A further increase in sales can be expected as anindispensable product for photoresists used for lithographic exposure with argon fluoride (ArF)
and extreme ultraviolet (EUV).
2: Information about ADEKA's Electronics and IT Materials Business
The Electronics and IT Materials Business provides SOZAI (our Excellent Value; products,technologies and services), which means indispensable cutting-edge materials for thedevelopment of ICT society in the semiconductor and display fields.
Its product portfolio consists of highly profitable products that have the highest global
market share. For instance, ADEKA ORCERA series, the high-dielectric material series, has a
global market share of 50% or more for the application for DRAM, the most advanced
semiconductor memory.
ADX 2023 (from FY2021 to FY2023), the mid-term management plan of ADEKA Group,
positions the next-generation ICT field as one of the important fields to enhance scaledramatically.
◆ Electronics and IT Materials Business Target in the MTMP from FY2021 to FY2023
KPI for FY2023:
Capital investment plan:OP

11 billion yen

Net Sales

44.1 billion yen

9.5 billion yen (3-years total)

ADEKA's Electronics and IT Materials Business was explained in detail at the briefing on
financial results for the 1st quarter of the FY2021 and on the Electronics and IT Materials
Business. Please refer to the materials posted on our website.
■Contacts
ADEKA CORPORATION
Publicity & Administration group, Legal Affairs & Publicity Department
Tel: +81-3-4455-2803