MICROTHERMAL DEVICES FOR FLUIDIC ACTUATION BY MODULATIONOF SURFACE TENSION

byAmar Sarbbesesh Basu

A dissertation submitted in partial fulfillmentof the requirements for the degree ofDoctor of Philosophy(Electrical Engineering)in The University of Michigan
2008

Doctoral Committee:
Professor Yogesh B. Gianchandani, Chair
Professor Ronald G. Larson
Professor Khalil Najafi
Associate Professor Shuichi Takayama
Assistant Professor Michel M. Maharbiz

© Amar Sarbbasesh Basu 2008

DEDICATION

To my loyal friends and extended family who have made life rich & fulfilling,and have been there for me through the years. To Dada, my source of wisdom andstrength. To Ma, my emotional rock and supporter. And to Baba, my educator, whosacrificed his own doctoral studies so he could better teach to his two sons.

ii

ACKNOWLEDGEMENTSFirst and most of all, I would like to thank the support of my advisor, Professor
Yogesh Gianchandani, without whom this work would not be possible.

Professor

Gianchandani, thank you for taking the risks in letting me choose my research project,and encouraging me to pursue the initial discoveries that led to this thesis. You haveworked me hard, challenged me, and pushed me towards success. Thank you for keeping
me out of the dreaded “analysis paralysis”, and thank you for your patience at times when
I have needed it.
Thank you to my committee members, Professor Khalil Najafi, Professor Ronald
Larson, Professor Michel Maharbiz, and Professor Shuichi Takayama for your input,
guidance, and support.
Thank you to Dr. Shamus McNamara (now at the University of Louisville) for
your mentoring during my first two years as a graduate student and your assistance infabricating the thermal probes. Thank you to Angelo Gaitas (Picocal, Inc.) for our
enjoyable collaborations on the thermal probes, and to Seowyuen Yee for your helpful
assistance in experiments and characterization. Thank you to the WIMS and SSEL staff
for endless administrative and technical support.

This work would not have beenpossible without your help.
Special thanks to all the people who have made my experience in graduate school
worthwhile and pleasant. To all of my labmates in the YG Research group and theiii

WIMS ERC, thank you for your friendship and the many good memories of graduate
school. I can’t even begin to list everyone because I know I will leave many out, so I will
say you know who you are. Finally, I’d like to thank my EECS 514 and EECS 515 classfor their patience and enthusiasm in my first year teaching.

iv

TABLE OF CONTENTS

DEDICATION

ii

ACKNOWLEDGEMENTS

iii

LIST OF FIGURES

vii

LIST OF TABLES

xiii

LIST OF APPENDICES

xiv

ABSTRACT

xv

CHAPTER 1: INTRODUCTION

1

1. MICROFLUIDICS FOR MINIATURIZED CHEMICAL ASSAYS

1

2. USING THE MARANGONI EFFECT FOR MICROFLUIDIC ACTUATION

3

3. CONTINUOUS FLOW MICROFLUIDIC SYSTEMS

10

4. MICRODROPLET-BASED “DIGITAL” MICROFLUIDICS

12

5. ORGANIZATION OF DISSERTATION

21

CHAPTER 2:

VIRTUAL MICROFLUIDIC TRAPS, FILTERS, CHANNELS, AND PUMPSUSING MARANGONI FLOWS

23

1. INTRODUCTION

24

2. THEORETICAL MODEL OF MARANGONI FLOWS

25

3. SIMULATION RESULTS

31

4. EXPERIMENTAL RESULTS

41

5. DISCUSSION

54

6. SUMMARY

57

CHAPTER 3: HIGH SPEED DOUBLET FLOW

59

1. BACKGROUND

59

2. TEMPERATURE GRADIENT THEORY

61v

3. SOURCE/SINK THEORY

63

4. EXPERIMENTAL CHARACTERIZATION

70

5. SUMMARY76

CHAPTER 4:

A PROGRAMMABLE ARRAY FOR CONTACT-FREE MANIPULATION OF

FLOATING DROPLETS BY MODULATION OF SURFACE TENSION

78

1. INTRODUCTION

79

2. THEORETICAL

82

3. SYSTEM DESIGN AND EXPERIMENTAL SETUP

91

4. EXPERIMENTAL RESULTS

94

5. DISCUSSION

102

6. SUMMARY

106

CHAPTER 5: CONCLUSIONS107

APPENDICES

112

BIBILIOGRAPHY

134

vi

LIST OF FIGURES
Figure 1.1: Comparison of conventional, multicellular Marangoni convection versus the present
approach. (a) Schematic of multicellular Marangoni flow occurring when a thin liquid layer
is isothermally heated from below. (b) Top view of hexagonal convection cells resulting
from conventional Marangoni convection (from [Mar07]). (c) Local, unicellular Marangoni
convection initiated by a heat source placed above the liquid layer ....................................... 5
Figure 1.2: Controlling fluid flow with Marangoni convection. In this overall vision, thermal
sources suspended above the surface of a thin liquid layer provide arbitrary, patterned heat
fluxes to the liquid surface, resulting in controlled surface tension gradients. Point heating
sources causes flow away from the heated surface, whereas point cooling sources cause
inward flow. Fast flow velocities can be achieved with small temperature changes becausetemperature and surface temperature gradients are steep at small length scales..................... 6
Figure 1.3: Comparison of non-mechanical microfluidic pumping methods. (a) Flow velocities(in continuous flow systems) or droplet velocities (in discrete fluidic systems) as a functionof substrate complexity for various pumping methods. (b) Flow/droplet velocities versus
the required drive voltage for the same pumping methods. Abbreviations and references foreach pumping method are as follows: Ma, Marangoni flow (this work) [Bas05A, Bas05B];
OT, Optical Tweezers [Kat01, Sas92]; ET, Electrostatic tip [Kats99]; Th-Ma, Thermal
Marangoni effect on droplet interfaces using lasers [Kot04]; OEW, Optoelectrowetting[Chi03]; OET, Optoelectrostatic tweezers [Chi04]; AC-EW, AC Electrowetting [Cho02];
DC-EW, DC Electrowetting [Cho03]; EHD, Electrohydrodynamic pumping [Fuh92,
Ahn98]; EO, Electroosmotic pumps, [Har91,Che02]; and MHD, Magnetohydrodynamic[Lem00]................................................................................................................................... 8
Figure 1.4: Comparison of continuous flow microfluidic systems and droplet systems. ............. 13
Figure 1.5: Illustration of droplet unit operations. ....................................................................... 15
Figure 1.6: Illustration of various techniques used from droplet manipulation, including the
Marangoni flow technique to be presented in this thesis. ..................................................... 17
Figure 2.1: Concept of a contactless microdroplet manipulator based upon Marangoni flows.
The flow is driven by heat sources of various geometries suspended above the oil layer. The
projected temperature gradient (shown in red) generates flows which emulate droplet
channels, reservoirs, and mixers. .......................................................................................... 25
Figure 2.2: Theoretical formulation of Marangoni flow driven by a surface temperature gradient.
In this figure showing the liquid cross section, it is assumed that the left side of the fluidlayer is heated, forming a temperature gradient oriented towards the left. is the surface
temperature gradient, is the tangential surface velocity of the Marangoni flow, and is thesurface normal vector. The parallel flow vectors illustrate the typical profile of surface andsubsurface flow. .................................................................................................................... 26
Figure 2.3: A microfluidic trap generated by a point heat source. (a) schematic showing thesuspended heat source, the projected Gaussian heat flux profile, and the toroidal flow region
in the oil layer. (b-c) Thermal CFD simulation results showing flow resulting from a
Gaussian heat flux with amplitude qo = 6 mW/mm2 and ro = 40 µm applied to a 140 µmthick layer of mineral oil with surface tension coefficient -0.16 mN/m-K. (b) Contours ofvii

stream function, illustrating pathlines in the oil layer. The 20 contours are equally spaced
between 0 and 1.5x10-9 kg/s. (c) Temperature profile in the oil layer, again with 20 equally
spaced contours between 300K and 301.4K. ........................................................................ 33
Figure 2.4: Simulated spatial velocity profile at various depths of the liquid for the simulation
shown in Fig. 2.3................................................................................................................... 34
Figure 2.5: (a) Three dimensional thermal fluid simulation showing the interaction of a
microfabricated thermal probe held above a layer of mineral oil. The numerical value of thetemperature contours depends on the applied power as shown in part (b); however, theshapes of the contours do not change. Inset shows the qualitative surface heat flux resulting
from the probe held at a 30° angle. (b) Maximum temperature increase on the liquid surface(∆TMAX) vs. separation between the probe and the liquid surface. (c) Maximum surface
temperature gradient vs. gap. In (b,c), the diamonds represent simulation results. The lines
are a 1/x best fit. .................................................................................................................... 35
Figure 2.6: Virtual droplet channels generated by parallel, linear heat sources. The channelboundaries are defined by the heat flux projected by two heated wires with separation s held
parallel to the liquid surface. Target-sized droplets are pulled into the channel by thesubsurface flows; others are excluded. Marangoni flows are shown in green and witharrows.................................................................................................................................... 37
Figure 2.7: Simulations of virtual channels formed by either two parallel heat fluxes with spacings, or, alternatively, a single linear source with width w. (a,c) show the temperature profileand flow vectors for 2 parallel linear heat sources with a spacing s = 900 µm. (b,d) shows
the same for a single line heat source with width w = 350 µm. In each case, surface
temperature profiles are drawn above the flow vectors. Simulations assume a 200 µm-thickmineral oil layer with a surface tension coefficient -0.16 mN/m- K. Heat flux amplitudes
are Gaussian with amplitude 6 mW/mm2 and radius 40 µm. uMAX is the maximum horizontal
flow velocity, and ∆TMAX is the maximum surface temperature change................................ 38
Figure 2.9: Control of flow velocities with toroidal flows generated by a microfabricated point
heat source. (a) Flow velocity vs. input power to the thermal probe plotted for three different
separation distances. Also shown are simulated flow velocities as a function of input power.
In the simulation, a Gaussian heat flux of increasing amplitude was applied to a 2D,
axisymmetric fluid layer. (b) Experimental flow velocity vs. separation with experimental
conditions as shown. A 140 µm layer of mineral oil was used in all experiments andsimulations. ........................................................................................................................... 43
Figure 2.10: (a) Cold probe experimental setup. (b) Collection of particles using reverse
Marangoni flow..................................................................................................................... 44
Figure 2.11: Effect of fluid depth. a) Radius of the convective region as a function of fluid
depth. b) Peak radial velocity as a function of fluid depth. In both graphs, experimental
conditions are as follows: probe type (R01, 35 Ω), input power=18 mW, air gap=100 µm,
and the liquid is mineral oil. Simulation conditions: q0 = 6000 W/m2, r0 = 50 µm, andmineral oil properties are used. ............................................................................................. 45
Figure 2.12: Applications of the toroidal flow pattern in particle and droplet collection. (a)Schematic showing the heat source, XY scanning stage, toroidal flow patterns, and particles
trapped within the collection area. Collection of (b) weed pollen in 125 µm mineral oil, and(c) 1 second exposure fluorescent image illustrating the movement of water microdroplets
containing fluorescent dye. ................................................................................................... 46
Figure 2.13: Collection of 25 µm weed pollen using local toroidal flows. (1) The heat source isfirst advanced towards the particles. (2) When the heat source reaches the area above theparticles, the particles are swept into the vortex and trapped. (3-4) The trapped particles are
moved to a new location and released by turning off the heater. .......................................... 47

viii

Figure 2.14: Droplet merging of four droplets with (φ = 200-400 µm). (0s) The droplets aretrapped in the self-circulating convective flow. (2s-9s) The droplets merge together, one byone, eventually forming a single, φ = 600 µm droplet. ......................................................... 48
Figure 2.15: Droplet rotation and mixing. (a) Schematic showing Marangoni flows around asuspended droplet which can rotate the droplet. (b) Experimental results showing single
axis rotation up to 300 µm/s obtained when a 650 µm diameter tip is placed near a droplet of
approx. the same dimensions. The tip temperature was ≈40°C. Flow patterns are visualizedusing immersed fluorescein particles and a 0.5 second CCD exposure with 490 nm/500 nm
excitation/emission filters. .................................................................................................... 50
Figure 2.16: Size selective filtration of droplets in virtual channels. (a) Micrographs showing two
500 µm-diameter droplets (circle) entering the channel while a smaller one (square) is
rejected. (b) Histogram showing the size selectivity of two droplet channels with 600 µm
and 970 µm spacing. Droplet statistics were compiled over video clips spanning 40
minutes. Bins are in 100 µm increments. ............................................................................. 51
Figure 2.17: Single droplet trapping with an annular heat flux. (a) Schematic illustrating theannular heat flux projected on the surface, the trapped droplet, and the exclusion of larger orsmaller droplets. (b) CFD Simulation. The shaded contours represent the surface
temperature gradient, with evenly spaced contours and a maximum temperature increase∆TMAX = 6°C. White arrows represent the subsurface flow at 140 µm depth beneath thesurface. The two regions of flow are marked with dashed lines. (c) Micrographs showing
strong affinity of a 1 mm droplet to the annular heat source (T≈120°C). Gap is ≈200 µm. 53
Figure 2.18: Guidewire pump emulated by a tapered heat source. (a) Schematic showing theorientation of the triangular heat flux projected on the fluid surface, and a droplet being
pulled in along its longitudinal axis. (b) CFD Simulation. Shaded contours represent thesurface temperature gradient, and white arrows represent the subsurface flow (140 µm
depth) which pushes the droplet from left to right. (c) Micrographs illustrating movement ofa droplet at 196 µm/s driven by a suspended heat source (T≈130°C) with 10° lateral taper
and a 5° taper in vertical spacing. Gap is ≈200 µm.............................................................. 54
Figure 3.1: Schematic of doublet flow generation. The heated thermal probe, when suspended
above a liquid, induces a high-speed doublet flow pattern at the surface. ............................ 60
Figure 3.2: Simulation of doublet flow due to surface momentum. ............................................. 62
Figure 3.3: Theoretical doublet model. (a) Schematic of doublet geometry illustrating a sink to
the left of the origin and a source to the right of the origin. Velocity is calculated at an
observation point P. (b) Streamlines of a doublet with dipole moment 25x10-6, plotted using
Eq. 3.4. (c) Contours of x velocity for the same doublet, plotted usinq Eq. 3.5. .................. 65
Figure 3.4: Simulation results of a doublet caused by a thermal dipole on the liquid surface. (a)Contours of the heat flux supplied to the surface of a 50 µm thick layer of water. The cold
spot is on the left, hot spot on the right. Separation is 20 µm. (b) Velocity vectors, showing
5 mm/s flow to the left of the sink. (c) Contours of velocity in the +x direction.................. 69
Figure 3.5: High-speed doublet flow is illustrated in 4 sequential micrographs taken at 1/30
second intervals. Polystyrene beads are used to visualize the flow. .................................... 70
Figure 3.6: Control of flow velocities. (a,b) Peak linear flow velocity as a function of (a) input
power, and (b) air gap. (c) Rotation rate in the eddies, as a function of air gap. (d) Flowvelocity vs air gap repeated for three different ambient liquid temperatures. Experimental
conditions are shown. The lines in (a) are a linear fit, and the lines in (b,c) are a fit to 1/x2.
............................................................................................................................................... 71
Figure 3.7: Flow reversal. The direction of the flow can be reversed by changing the angle of theheater. For example, using probe R02 at a 15° tilt, 15 mW input power, and a ~15 µm airgap, the doublet flows left to right, and the rotation in the vortices is counter-clockwise(left). Increasing the angle to 30° while keeping all other parameters constant reverses theixdirection of the flow and rotation and shifts the location of the vortices to the left of thecantilever (right).................................................................................................................... 73
Figure 3.8: Uniform flow generated with a linear array of doublets. (a) Theoretical streamlines
of flow generated by an array of 8 doublets with 85 µm spacing obtained by summing therespective stream functions. (b) Linear flow generation using an 8-probe array, numbered
1-8 from the top down. The array was placed ~15-20 µm above the liquid surface, held at a
15° tilt, and biased with a total power of 92 mW. Probes 1 and 4 were nonfunctional.
Trajectories for 3 particles are marked with a square, triangle, and circle on micrographs
taken at 3 second intervals. ................................................................................................... 74
Figure 3.9: (a) Schematic of subsurface particle flow (80 µm below the surface). Particles flow
radially inward towards the area underneath the microheater tip. Upon reaching this point,
they are immediately propelled upwards to the surface. (b) Sequential micrographs show
three particles (marked respectively with a square, triangle, and circle) converge towards thecenter and then disappear from the field of view as they are propelled upwards.................. 76
Figure 4.1: A complete system for programmable, non-contact droplet actuation based on
Marangoni flows, including a 128-pixel array of resistive heaters suspended above the oillayer, control circuitry, and a graphical user interface. ......................................................... 81
Figure 4.2: Results from a computational fluid dynamics simulation (FLUENT 6.0). (a) Surface
temperature contours generated by an active heater and velocity vectors of the surface andsub-surface Marangoni flows. (b) Flow velocity vs. peak surface temperature change for100 µm, 200 µm, and 500 µm gap between the heater and liquid. CR represents thecoupling ratio, which is defined as the ∆T on the liquid surface divided by the ∆T in theheater. .................................................................................................................................... 84
Figure 4.3: 3-D CFD simulation of push and pull mode actuation on a Ф=200µm and Ф=800µm
droplet, respectively. The droplet volumes were meshed as an immiscible spherical volume
within the fluid layer. (a) Flow vectors showing pressure and viscous forces on a 200 µm
droplet offset 1 mm from the center of the heat source. (b) Moment force on an 800 µm
droplet offset 500 µm from the center of the heat source. (c) A trapped 800 µm droplet after
it has been pulled into the center of the heat source.............................................................. 85
Figure 4.4: Simulated results. Forces acting on a Ф=800 µm and Ф=200 µm droplet, taken fromthe simulation in Fig. 4.3. (a) Moment force on the two sizes of droplets at various lateral
offset distances from the center of the heat source. (b) Lateral pressure force (directed awayfrom the heat source) for the two droplets, also at various distances from the heat source. . 87
Figure 4.5: Micrograph of heater array ......................................................................................... 91
Figure 4.6: Experimental setup, showing the heater array above a glass slide on which the liquidsamples are placed................................................................................................................. 92
Figure 4.7: (a) Schematic of logic and driver electronics. There are 128 joule heaters, and one
D-latch and driver for each (these elements are represented by the <128>). The remaining
components are shared. The forward slash indicates a multi-line bus, and the number
beneath indicates the number of lines on the bus. (b) Timing diagram, showing the serial
input scheme for toggling heaters on and off. ....................................................................... 93
Figure 4.8: Experimental results. (a) Temperature of an active heater (TH) vs. input power. Also
shown is the temperature increase one pixel away (T1), two pixels away (T2), and on thesubstrate 2 cm away (TS). (b) Flow velocity (25 µm pollen) and droplet velocity (Ф=300µm droplet) vs. input power and heater temperature. This experiment used Dow Corning
550 silicone oil and a heater-liquid gap of ~100 µm. (c) Comparison of maximum flow
velocities obtained with 4 fluids including mineral oil, Dow Corning 550 and 704 silicone
oils, and Fluorinert FC-3283 dielectric liquid. Calculated figures of merit for each fluid are
given in the figure. ................................................................................................................ 95
Figure 4.9: Push-mode actuation. (a) Surface Marangoni flows create a droplet force (FD)oriented away from the active heater. (b-e) A Ф=900 µm floating droplet is moved along axsquare path by activating multi-heater configurations sequentially. Active heaters areshaded. PH=1 W/heater, gap≈400 µm, and the fluid is DC-550 silicone oil. ....................... 99
Figure 4.10: Pull-mode actuation and droplet merging. (a) Subsurface Marangoni flows create aforce on the droplet (FD) toward the active pixel. (b-e) Droplet merging with pull-mode
actuation. Two droplets (Ф=600 µm) are merged through sequential activation of theheaters. Active heaters are shaded. PH=1 W/heater, gap≈300 µm, and the fluid is DC-550
silicone oil. .......................................................................................................................... 100
Figure 4.11: Preventing droplet evaporation. Measurements showing variation of droplet size
over time (log scale) for a Ф=650 µm droplet in single and double layer oil system. The
single layer oil system consists of DC-550 silicone oil, and two layer system consists of DC550 and mineral oil.............................................................................................................. 101
Figure 4.12: Scaling study (simulation). (a) The surface temperature gradient and corresponding
shear stress is plotted at various length scales. In all cases, the absolute temperature changeon the liquid surface (∆TS) is 10°C. (b) Flow velocity (blue diamond) and flow reversal
depth (red square) plotted for each length scale, under the same condition of ∆TS= 10°C.105
Fig. A1.1: The microfabricated thermal probe which is used to generate flow. (a) Schematic
showing a polyimide cantilever overhanging the edge of a silicon substrate. The integrated
heater is located on the cantilever just beneath the tip. The shading along the length of thecantilever indicates the thermal gradient that is present when the heater is powered. (b)Scanning electron micrograph of the fabricated thermal probe, with inset showing the
pyramidal tip (from [Li03])................................................................................................. 112
Fig. A1.2: Scanning electron micrograph of a microfabricated thermal probe array [McN04B]
used to generate flow. The inset shows the scanning tip with approximately 100 nm tip
diameter............................................................................................................................... 113
Fig. A1.3: Fabrication process. Details are given in the text....................................................... 114
Fig. A1.4: Temperature characterization of the R01 type thermal probe. The three lines show thefractional resistance change of probe R01 as the input power was ramped under various
conditions. The probe is connected to a wheatstone bridge circuit which supplies measures
the probe resistance. tip temperature is calculated by the resistance change ..................... 116
Fig. A1.5: Thermal time constant of a typical probe. The x axis shows time in 1 ms divisions, andthe y axis shows the voltage, with 50 mV/division. The time constant is approximately 5
ms. ....................................................................................................................................... 117
Fig. A2.1: Schematic of simulation model, showing the thermal probe is held in air above a liquidfilm. Symmetry is used to simplify the simulation so that only ½ of the model is solved.
All perpendicular field gradients are set to null at the mirror symmetry plane................... 118
Fig. A2.2: Typical heat flux and temperature profiles on the liquid surface driven by the probe.
(left) A composite image showing qualitative heat flux and temperature contours on thefluid surface. (right) This graph shows the parallel cross section of a heat flux profile
supplied by the thermal probe to the liquid surface under typical conditions. An
approximate Gaussian fit is shown...................................................................................... 119
Fig. A2.3: Side view of simulation results, showing qualitative temperature contours in the probe
and the liquid surface. The magnitude of temperature depends on the input power applied;
however the contour shapes remain the same. .................................................................... 120
Fig. A2.4: Heat flux supplied to the liquid surface from the probe at various attack angles.
(simulation). The probe is suspended 15 µm above the liquid surface and is angled at 15,
30, and 45 degrees with respect the liquid plane. These contours are qualitative; theirmagnitudes scale with the amount of input power. The line across the middle of the heat
flux plots represents the probe axis. .................................................................................... 121
Fig. A3.1: Process flow for scanning thermal lithography of AZ5214E resist. (a) Flood exposure
generates photoacids. (b) Spatially localized thermal cross-linking occurs under the heatedxi

probe tip (inset) as a result of the photoacids and elevated temperatures. (c) The insoluble
cross-linked region remains after development in TMAH developer. ................................ 124
Fig A3.2: (a) Schematic of the micromachined single probe, and (b) SEM of the 8-probe arraysurface micromachined from polyimide on a Si substrate. Thin film resistors integrated on
the tip of the cantilevers allow the individual probes in the array to be heated independentlyof one another...................................................................................................................... 125
Fig. A3.3: Dot sizes can be controlled by the heating times as well as heating power. (a)Reduction in size with shorter heating times using a probe biased at 18 mW on 450 nm
resist. (b) Dot sizes vs. heating time for 18 mW and 13.5 mW power.............................. 129
Fig A3.4: (a) Finite element simulations with photoresist thicknesses of 1.4 µm, 450 nm, and 100
nm show that the geometry of heat flow becomes vertical as the photoresist is thinned below
the diameter of the tip, resulting in smaller features. (b) Dots obtained after fully
developing 1400 nm and 450 nm resist follow the same trend. The roughened surfaces in
the micrographs are due to an Au/Pd layers sputtered for SEM. ........................................ 131
Fig. A3.5: (a,b) Lines of 500 nm width written by patterning successive dots with 200 nm spacing(1 s heating per dot) can be seen after partial development of the photoresist. (c,d) Parallel
lithography is demonstrated where two adjacent probes in the 8 probe array simultaneously
generate the same pattern. ................................................................................................... 132

xii

LIST OF TABLES

Table 1.1: Techniques for microdroplet manipulation. An ‘X’ is placed in the column if thetechnique offers the feature indicated on the top of the respective column .......................... 20
Table 4.1: Material properties for 3 liquids used in generating Marangoni flows. Values marked
with a * are calculated using the Eötvös law, and those marked with ** are estimated fromsimilar fluids.......................................................................................................................... 90xiii

LIST OF APPENDICESAPPENDIX 1: STRUCTURE, FABRICATION, AND OPERATION OF THERMAL PROBES

112

1. STRUCTURE

113

2. FABRICATION

114

3. OPERATIONAL CHARACTERISTICS

115

APPENDIX 2: INTERACTION OF PROBES WITH THE LIQUID SURFACEAPPENDIX 3: SCANNING THERMAL LITHOGRAPHY -118

MASKLESS, SUBMICRONTHERMO-CHEMICAL PATTERNING OF PHOTORESIST BY ULTRACOMPLIANT PROBES
122
1. INTRODUCTION

122

2. PROCESS AND DEVICE CONCEPTS

125

3. EXPERIMENTAL RESULTS

127

xiv

ABSTRACT

Fluid manipulation at the micrometer scale has traditionally involved the use ofbatch-fabricated chips containing miniature channels, electrodes, pumps, and otherintegrated structures. This dissertation explores how liquids on non-patterned substrates
can be manipulated using the Marangoni effect. By placing miniature heat sources abovea liquid film, it is possible to generate micro-scale surface temperature gradients which
results in controlled Marangoni flow. A variety of useful flow patterns can be designedby tailoring the geometry of the heat source.
As a surface tension-based phenomenon, the Marangoni effect is an efficientactuation mechanism at submillimeter dimensions. With optimized liquid carriers, flow
velocities >10 mm/s can be generated with only small perturbations in surface
temperature (<10 K).

Thermally efficient microfabricated heat sources, such aspolyimide thermal probes, can produce >1700 µm/s flow velocity in mineral oil while
consuming <20 mW of power. In water films, the probes can generate surface doubletswith linear velocities up to 5 mm/sec and rotational velocities up to 1300 rpm, making
them potentially useful for active mixing.
The utility of Marangoni flows is demonstrated within the context of digital
microfluidic systems.

In contrast to conventional microfluidics, where samples areflowed through microchannels, digital microfluidic systems contain liquid samples in
micro and nanoliter-sized droplets suspended in an immiscible oil layer. Marangoni
xv

flows generated in the oil layer can manipulate droplets without any physical structures,
thus avoiding surface contamination. By using point, linear, annular, and tapered heatsource geometries, it is possible to engineer Marangoni flows which mimic thefunctionality of droplet channels, mixers, size-selective filters, and pumps. Arbitrary,
two-dimensional actuation of droplets (Ф=400-1000 µm) can also be achieved using anarray of heaters suspended above the oil layer. The 128-pixel heater array incorporates
addressing logic and a software interface which allows it to programmatically transportand merge multiple droplets through the sequential activation of heaters.
The appendices outline other aspects of thermal probes, including i) the structure,fabrication, and operational characteristics of single probes and probe arrays, and ii)
scanning thermal lithography, a technique for nanoscale patterning of thin films with
heat.

xvi

CHAPTER 1:
INTRODUCTION

1. MICROFLUIDICS FOR MINIATURIZED CHEMICAL ASSAYS
Richard Feynmann, in his famous 1959 speech [Fey59], proclaimed that “there isplenty of room at the bottom”, encouraging leading scientists to explore a new field of
science and engineering at micrometer and nanometer length scales. Among the several
intriguing possibilities he described, Feynman noted “The Marvelous Biological
System”, referring to microorganisms which move, interact, and store information at
small length scales. He challenged scientists to build precision instruments that would be
able to study and interact with these systems at the same length scales. Forty five years
later, Feynman’s vision has now grown into one of the most promising areas ofengineering and biomedical research.
One of the primary drivers behind the renewed interest is microfabrication
technology, which allows us to manufacture micrometer scale, planar structures using the
combined technologies of thin film deposition, photolithography, as well as chemical andplasma etching [Mad02]. These techniques, borrowed from the semiconductor industry,
can be used to produce small microchips containing 1) various fluid channels, pumps, orvalves for handling liquid samples of cells and molecules, and ii) sensors, heaters, andother instruments for performing sample analysis.
1

The devices, collectively termedmicro total analysis systems (µTAS) or “lab-on-a-chip” (LOC), have revolutionized theway biological assays are performed, enabling massively parallel operation, analysis ofminiscule sample volumes, integrated sample preparation, low power consumption, andportability. The first microfabricated DNA analysis system, incidentally, was developed
here at the University of Michigan [Bur96].
Microfluidic systems will continue to play an increasingly significant role in thein vitro diagnostics (IVD) market, whose market size is expected to be ~$40 billion in2008 [Ros04]. The market size for microchip technologies in general exceeded $1.7
billion in 2008, and is expected to grow at a 25% annual growth rate to $6 billion in 2017
[Kru07]. The major application categories in the microfluidics market include highthroughput screening (HTS) and compound profiling, point of care (POC) diagnosis andtesting, chemical analysis, drug delivery, genomics/proteomics, and homeland security[Ros04]. As of January 2008, numerous successful commercial µTAS devices havepenetrated a number of areas within the IVD market. A few notable examples include thefollowing:•

DNA microarrays have enabled massively parallel, high throughput profiling ofgene expression (Affymetrix, Roche Diagnostics)•

Microfluidic cards for multiplexed Polymerase Chain Reaction (PCR) andelectrophoretic separation of DNA.

These cards can handle up to 380

simultaneous reactions and have reduced analysis time by 1 order of magnitude(Applied Biosystems)•

Miniature

microfluidic

systemsfor

ReverseTranscriptase

PCR

and

electrophoresis have enabled simple and portable genetic detection of2

microorganisms (Handylab)•

Integrated, sample-to-answer genetic detection systems using microfluidic cards
can perform sample preparation, PCR, electrophoretic separations, and molecularpurification in portable, highly parallel format with low reagent consumption(Agilent Technologies, Caliper Life Sciences).

•

Portable blood analyzers have enable point of care (POC) testing of various
biological markers (Honeywell, Siloam Biosciences)•

Microfabricated glucose monitors have provided a portable and less invasive
option for diabetics to monitor their blood sugar (TheraSense)

2. USING THE MARANGONI EFFECT FOR MICROFLUIDIC ACTUATION
In his speech, Richard Feynman noted that the physics of nature changes at small
lengths scales [Fey59]. In microfluidic systems, physical scaling laws enhance surface
phenomena and diminish the importance of pressure, inertia, gravity, and othervolumetric forces. As a result, many pumping techniques developed for conventional
length scales become less effective. For example, microfluidic channels have a large
hydraulic resistance due to their small cross sections, and require larger pressures fromexternal pumps. At the same time, other physical phenomena, such as surface-based
phenomena, tend to become more efficient at small length scales. One such example is
the Marangoni effect, the topic of this thesis.
Marangoni flow, the movement of liquids due to surface tension gradients, is
responsible for many common phenomena. These include, for example, the dispersion ofoils in dishwater upon the addition of detergent [Her96], and the rotating flow of particles
3below a candle wick [Adl70]. Nevertheless, at macroscopic length scales, the Marangoni
effect is not a practical mechanism for fluidic actuation because surface forces are
typically weak compared to pressure, inertial, and other body force mechanisms.
However, like other surface phenomena, it scales favorably to the micrometer regime. If
l is considered the length scale, surface tension forces are proportional to l, pressure
forces are proportional to l2, and inertial forces are proportional to l3. Thus, at small
length scales, surface tension forces become increasingly significant compared to theother two. Furthermore, the high ratio of surface-area to volume present in microscale
devices suggests that the Marangoni effect could be useful for microfluidic actuation.
The traditional, “macroscopic” approach for generating Marangoni flow is via
isothermal heating (Fig 1.1a). A thin liquid layer is heated uniformly from below, andthe resulting flow is a pattern of hexagonal convection cells (Fig. 1.1b) [Mar07, Kos93].
This multicellular flow, first observed by Henri Bénard in the late 1800’s [Bén00], wasoriginally thought to be due to natural convection, and was later attributed to the
Marangoni effect by Brock and Pearson in the 1950’s [Blo56, Pea58, Mar07]. Since
then, it has been the subject of several efforts to mathematically analyze fluid stability[Kos93]. From a practical standpoint, however, the geometry and stability of the flow isvery sensitive to the fluid container and the thermal boundary conditions. Therefore,
isothermally-generated Marangoni flows provide little opportunity for localized fluidic
manipulation in the context of an automated system.

4

Figure 1.1: Comparison of conventional, multicellular Marangoni convection versus
the present approach. (a) Schematic of multicellular Marangoni flow occurring whena thin liquid layer is isothermally heated from below. (b) Top view of hexagonal
convection cells resulting from conventional Marangoni convection (from [Mar07]).
(c) Local, unicellular Marangoni convection initiated by a heat source placed above
the liquid layerThis dissertation focuses on a localized approach for generating Marangoni flow:by imposing micrometer scale temperature gradients on the surface [Bas07B]. This canbe done by suspending small heat sources just above the liquid surface (Fig. 1.1c). The
heat flux supplied to the surface causes localized variation in surface temperature. This,in turn, causes a corresponding surface tension gradient due to the inverse relation
between surface tension and temperature that exists for most liquids. In the presence of a5

Figure 1.2: Controlling fluid flow with Marangoni convection. In this overall vision,
thermal sources suspended above the surface of a thin liquid layer provide arbitrary,patterned heat fluxes to the liquid surface, resulting in controlled surface tension
gradients. Point heating sources causes flow away from the heated surface, whereas point
cooling sources cause inward flow. Fast flow velocities can be achieved with small
temperature changes because temperature and surface temperature gradients are steep at
small length scales.
surface tension gradient, a shear stress is generated at the liquid boundary which drives
surface flow away from the heated regions (low surface tension) and towards the cool
regions (higher surface tension). Cooling sources can generate Marangoni flow in thereverse direction. Thus, from a theoretical perspective, it would be possible to engineer
arbitrary surface flows by superimposing multiple thermal sources as shown in Fig. 1.2.
This approach takes advantage of the favorable scaling of surface forces andcould provide several important advantages in practicality and efficiency. The firstpotential benefit is flow localization: in contrast to isothermal heating, a point or linear
heat flux favors the formation of a single Marangoni cell, which allows for precise
control of the geometry and flow speeds of the cell.
The second benefit is efficiency. As will be shown in Chapter 2, Marangoni flow
velocities are proportional to the surface temperature gradient. By using microscale heat6sources it is possible to achieve sharp temperature gradients which enable fastervelocities while minimizing the absolute changes in surface temperature. An important
aspect of this technique is that the heat sources used to generate flow are suspended
above the oil. Benefiting from the low thermal conductivity of air, this approach creates
sharp surface temperature gradients which would not be possible were the heat source
embedded in the fluid. Embedded heaters would also cause significant heating in thebulk fluid which is undesirable for bio-analytical microsystems.
The third benefit is that it does not require a patterned fluidic substrate. Fig.
1.3A compares flow velocities and substrate complexity for various pumping methods.
Substrate complexity is qualitative measure which considers the components, materials,
and fabrication processes required to make the fluidic chip. The majority of popular
techniques in microfluidic systems require patterned multilayer substrates containing
electrodes, channels, and magnets, or mechanical components. Others require a special
surface, such as a thermally insulative polystyrene [Kot04] or a photoresponsive layer[Chi03, Chi04] to function properly. Mechanical pumps, which generally require many
components and multilayer fabrication steps, are not shown in the graph. From theperspective of substrate complexity, the Marangoni flow technique places norequirements on the fluidic substrate; all the complexity of generating flow is placed in
the heat sources held above the fluid. Since this portion of the system is reusable, thepresent approach can potentially reduce the cost of repeated experiments.
Compared to other pumping techniques, Marangoni flow also offers low drive
voltages (Fig. 1.3B). For example, electrical field-based techniques such as electroosmotic (EO) and electro hydrodynamic (EHD) pumping, requires high voltages up to 1

7

Figure 1.3: Comparison of non-mechanical microfluidic pumping methods. (a) Flowvelocities (in continuous flow systems) or droplet velocities (in discrete fluidic systems)
as a function of substrate complexity for various pumping methods. (b) Flow/droplet
velocities versus the required drive voltage for the same pumping methods.
Abbreviations and references for each pumping method are as follows: Ma, Marangoni
flow (this work) [Bas05A, Bas05B]; OT, Optical Tweezers [Kat01, Sas92]; ET,
Electrostatic tip [Kats99]; Th-Ma, Thermal Marangoni effect on droplet interfaces using
lasers [Kot04]; OEW, Optoelectrowetting [Chi03]; OET, Optoelectrostatic tweezers[Chi04]; AC-EW, AC Electrowetting [Cho02]; DC-EW, DC Electrowetting [Cho03];
EHD, Electrohydrodynamic pumping [Fuh92, Ahn98]; EO, Electroosmotic pumps,[Har91,Che02]; and MHD, Magnetohydrodynamic [Lem00].
8

kV, although newer methods like electrowetting-on-dielectric (EWOD) have reduced thisrequirement to 20 V. The presence of high electric fields, particularly DC fields, can leadto electrolysis which degrades electrodes and also causes bubble formation in channels.
As a thermal actuation technique, Marangoni flows are generated by electrically heating asource. By using an efficient microfabricated heat source with <40 Ω resistance, flow
velocities up to >5 mm/s can be achieved with voltages <2 V and input powers <25 mW.
This is due not only to the efficient design of the heat source, but also the efficientconversion of heat to mechanical energy at small length scales. Thus, this technique has
potential for enabling low power, reconfigurable microfluidic systems.
A fifth benefit is the lack of physical contact between the heat source and theliquid sample, which eliminates contamination of the device and cross-contamination
between samples. A previous approach to using Marangoni flow for fluidic actuation
requireselectrochemicallygenerated

contamination of the sample.

surfactants[Gal99],which

causesionic

Temperature gradients generated by substrate heaters[Dar03] or external lasers [Kot04] have also been used to initiate Marangoni flow andmove a liquid droplet or film on a substrate. Both these approaches, however, requirethat the liquid sample be in contact with the substrate.
In this approach, aqueous samples are contained in droplets which are suspended
in a high-density, immiscible oil layer. Due to the high density of the oil, the droplets
float near the surface, away from the actuator and the substrate below, and they canmanipulated using Marangoni flows generated by the heat sources from above. Thisapproach to fluidic manipulation is less prone to contamination than those mentioned

9

above, as well as other popular techniques for droplet manipulation, such as
electrowetting [Cho03, Yoo03].
The last benefit is the central theme of this dissertation: the ability to engineer
Marangoni flows. Using microscale heat sources of various geometries, it is possible toshape the surface temperature gradient and the resulting Marangoni flow. These flows
can be used to manipulate liquids, particles, and droplets without any physical structuresin the liquid film. Microdroplets, in particular, have potential applications in microfluidic
biochemical assays.

3. CONTINUOUS FLOW MICROFLUIDIC SYSTEMS
In general, microfluidic sample handling can be categorized into two broad
categories. The early generations of microfluidic chips have been primarily “continuous
flow” systems. In other words, reagents and samples are flowed through microchannels
formed on the fluidic substrate. These channels can be formed in a number of ways,
including bulk micromachining of silicon [Che97], chemical etching of glass [Har92,
Sei93], parylene deposition with a sacrificial photoresist layer [Man97], andmicromolding with a silicone elastomer [Xia98]. Due to the small cross section andlength of the fluidic channels, small amounts of liquids are consumed, and flows areprimarily laminar in nature [Tak01], resulting in predictable flow and mixing profiles.
Mechanical actuators, similar to conventional pumps, can be used to generatepressure and flow of liquids through microchannels. The most common implementation
is a peristaltic membrane pump, driven by integrated thermopneumatic, electrostatic, andpiezoelectric actuators, or by off-chip pressure driven sources [Gro99, Xie04, Ung00].
10

Since these devices often require moving parts with out of plane deflection, device
reliability and fabrication complexity is often a concern for mechanical pumps.
Several non-mechanical methods, which take advantage of surface and capillaryeffects in small channels, are also effective in controlling fluids without moving parts.
These include electro-osmotic [Har91, Che02], electrohydrodynamic [Fuh92, Ahn98],
thermocapillary [Sam99A, Sam99B], and magnetohydrodynamic pumps [Lem00], alongwith many more. These pumps generally rely on the interaction of electromagnetic fields
with mobile charges in the fluid, and often require large field strengths in order tofunction. However, they are more amenable to integration because their fabrication
complexity tends to be simpler. For example, electro-osmotic pumps require only twoelectrodes aligned in the channel [Har91]. For a review of micropump technologies, thereader is referred to [Ngu02].
Although the continuous flow systems are appropriate for many assays, users seek
several areas of improvement. First of all, due to the high hydraulic resistances of the
microchannels, pumps must generate large pressure heads in order to achieve reasonableflow rates. The presence of moving parts is a concern for mechanical pumps, and innonmechanical pumps, high field strengths can cause undesirable effects such as
electrolysis.
Another issue is reconfigurability.

Early in the years of digital electronics,

application specific IC’s (ASICs) were designed to perform specific computing tasks.
ASICs were eventually replaced by a more versatile microprocessor chip which could be
reprogrammed to perform a wide range of general computations. Similarly, the first
generation of fluid handling chips have been designed with fixed geometries for use in a11

specific assay. While this is sufficient if the fluid handling protocol is fixed, it does
present a problem if flexibility in the handling of reagents is required [Gas04, Cho03].
With a fixed geometry, each assay requires its own chip design and fabrication, resulting
in non-recurring engineering (NRE) costs and effort.
Still another issue with continuous flow systems, arguably the most significant, isthe problem of surface adsorption. Hydrophobic proteins and DNA have low surface
hydration energies [Gas04], making it likely that any contact to a solid surface will resultin nonspecific adsorption; thus, any degree of contact or wetting between a liquid sample
and the channels walls can result in surface adsorption.

Most channel materials,

particularly hydrophibic materials such as Teflon, Parylene, and Polydimethylsiloxane(PDMS) are particularly susceptible to such adsorption [Yoo03, Sia03, Son03].

In

microchannels, the adsorption of proteins and cellular debris leads not only tocontamination, but can also cause channel blockages [McC03].

More importantly,

contamination eliminates the possibility of reusing the device, and the sample loss due toadsorption can make it difficult to detect low concentration samples [Lin06].

4. MICRODROPLET-BASED “DIGITAL” MICROFLUIDICS
Digital microfluidic systems offer an elegant alternative to continuous flow
microfluidics (Fig 1.4). In these systems, liquid samples are handled in the form ofcompartmentalized droplets.

Specifically, aqueous microdroplets immersed in an

immiscible phase serve to encapsulate reagents and to function as microscale reaction
containers.

Precise, user-defined chemical reactions may be achieved by transportingand merging droplets containing the appropriate samples and reagents [Son03]. Some of12

these systems rely on microchannels to move the droplets; others rely upon interactions
between the droplets and a two dimensional grid of microstructures which can generate
arbitrary movements. The details of these techniques will be given below.
Compared to continuous flow microfluidic systems, droplet systems offer anumber of important advantages. First, reagent consumption can be drastically reduced
because droplet volumes are on the order of nanoliters, picoliters, and even femtoliters.
With low droplet volumes, it is possible to detect low concentrations and even single
molecules of DNA due to the increase in effective concentration at small volumes[Nak03]. Second is an inherent ability to store and isolate a large number of reagents.
For example, if 3 µm droplets are used, nearly 1010 individual containers can be stored in
a 1 mL volume. The liquid-liquid interface between the droplet and the immiscible phaseserves as a skin to prevent cross contamination between droplets [Son03]. Surfactant
chemistries can be used to prevent adsorption to this interface, which adds an additionalsafeguard against cross contamination or loss of function. Third is the possibility of
elegantly managing thousands of samples simultaneously in a scalable manner [Cho03,
Chi03, Cha06], allowing for a high throughput, parallel processing.

By contrast,

Figure 1.4: Comparison of continuous flow microfluidic systems and droplet systems.
13continuous flow systems require complex valving for isolating multiple reagent streams[Tho03].
From an application standpoint, microdroplet-based systems have beensuccessfully employed in a number of biochemical assays. The low volumes and fastdiffusive mixing rates allow the study of enzyme kinetic reactions in real time [Son03].
The ability to screen a large number of droplets, each with a different composition, hasbeen shown to be indispensable in optimizing protein crystallization conditions [Zhe03].
PCR amplification in droplets allows the detection of single molecules of DNA [Nak03].
Droplets can be used to preconcentrate and isolate solutes [He04], and they also offer acontrolled, low-volume microenvironment of droplets for the culture and study of single
cells [He05].

The absence of dilution in the encapsulated environment enables

quantitative measurements of intra and extracellular secretions [Iri04]. Given the large
number of applications and the advancement of droplet system technology, it is likelythat the use of droplets in biochemical assays will grow rapidly in the next several years.
In order to mirror the complete set of fluidic operations that would be conducted
on a laboratory benchtop, the ideal digital microfluidic device should be able to performthe following droplet functions (Fig. 1.5):•

Storing reagents in precisely metered quantities in an isolated manner•

Transporting droplets from one location to another•

Mixing droplets together in precise quantities.

•

Splitting droplets into aliquots for use in multiple downstream reactions

The broad range of approaches for performing microdroplet unit operations are
summarized in Fig. 1.6 and Table 1.1.

In the most basic approach, droplets are14

Figure 1.5: Illustration of droplet unit operations.

transported through microchannels in the form of plugs. Various channel structures suchas T-junctions can be used to generate, mix, split, and merge droplets [Son03]. The
disadvantage of this approach is that it requires external pumps to generate flow inchannels. A somewhat surprising advantage to using droplet channels is that there is nocontact between the droplet and the channel walls.

The hydrophobic carrier fluid

surrounding the droplets forms a thin boundary which separates and isolates the droplet
from the wall [Son03]. Therefore, this technique avoids surface adsorption. However,the drawback is its lack of programmability because the channel geometries are fixed.
Electrowetting on dielectric (EWOD), perhaps the most popular technique fordroplet manipulation, uses voltages on a two dimensional grid of electrodes to control the
movement of droplets [Pol02]. An aqueous droplet is sandwiched between an upper andlower surface. The lower surface contains a grid of control electrodes coated with ahydrophobic surface, while the upper surface contains one large electrode which serves
as the ground plane. When a voltage is applied to one of the control electrodes, thesurface becomes hydrophilic, and the droplet is attracted to the surface. By activating
adjacent electrodes in a sequential manner, it is possible to create surface energy
gradients which can move droplets from one electrode to the next. Other activation
patterns can split, cut, merge, and dispense droplets via electronic control [Cho03].
15

Optoelectrowetting, a similar technique, also relies on switching surface energies ofelectrodes, but the switching is done via optical means, thus avoiding the need toelectronically address each electrode [Chi03].
Although both electro and optoelectrowetting can perform a wide range of
operations, perhaps the most fundamental limitation with these techniques is that theyrequire the droplet to wet the surface. The avoidance of surface contact cannot be underemphasized, and it is a serious concern if the system is to be reusable or able to detect
small amounts of reagents. Due to its high hydrophobicity, Teflon is particularly
susceptible to adsorption. It is possible to reduce adsorption by maintaining an acidic pH
in the droplet, reducing the duration of inactive time, or by the use of plasma deposited
fluoropolymer coatings [Bay07, Yoo03]. It has also been suggested that if silicone oil isused as the encapsulating medium, the droplet may be separated from the Teflon surface
by a thin film of oil [Sri04]; however, the effectiveness of the technique depends
significantly on the interfacial tension between the oil and the protein concentration in thedroplet. None of these techniques for avoiding adsorption are 100% effective, as would
be required for a robust, reusable device.

Adsorption can also render hydrophobic

surfaces hydrophilic, which results in contact angle hysteresis and interferes with the
EWOD actuation [Yoo03].
Optical tweezers (lasers) rely on radiation pressure which acts on the liquid-liquidinterface of the droplets [Ash80, Kat01, Sas92, Chi07]. Since the typical forces are fairly
small, optical traps work with small droplets with volumes on the order of femtoliters.
Unfortunately, optical tweezers can only attract particles which have a higher refractive
index than the surrounding media. The index of refraction in aqueous droplets (n = 1.33),

16

is always lower than that of the surrounding oil; therefore, the laser spot repels droplets

Droplet splitting and transport using
electrowetting on a grid of electrodes [Pol02]

Droplet generation, mixing, and transport ina microfluidic channel network [Son03]

Droplet transport
using
optoelectrowetting[Chi03].
OET
uses light and aphotoconductive
surfaceandpassiveelectrodes
toinitiate
dropletmovement.

Droplet trapping using dielectrophoresis on a
Splitting of droplets in microfluidic channels
grid of electrodes [Gas04]
using Electric fields [Lin06]

Contactless manipulation and merging of
Splitting and transport of droplets using suspended droplets using Marangoni flows
using a suspended array of heaters [Bas07]
substrate heaters [Dar03]

Figure 1.6: Illustration of various techniques used from droplet manipulation, including
the Marangoni flow technique to be presented in this thesis.
17rather than attracts them. To overcome this issue, the laser beam must be scanned tocreate a cage-like optical profile, requiring a more complex setup.
Dielectrophoresis (DEP) is a promising approach which uses non-uniform AC
electric fields acting on the liquid-liquid interface of a droplet. Positive DEP forces canattract a droplet, avoiding the problem of having to create cages as with optical traps.
Moreover, greater forces are possible with DEP, allowing the manipulation of droplets up
to 100 nL [Gas04].

Using a two dimensional grid of electrodes, droplets can be

manipulated and merged arbitrarily.

Although DEP devices do not rely on surface

contact, in most cases droplets sit on the substrate. It is not clear whether this techniquewill result in contamination.
DC and pulsed electric fields acting on the liquid-liquid interface can also be used
to perform a wide range of operations. Weitz et al. demonstrated the use of both DC andpulsedfieldstodispense

and

split

droplets

insidemicrochannels[Lin06].

A DC electric field at a channel bifurcation can be used to split a droplet into two
daughter droplets with a positive and negative charge, respectively. The existence of
charge allows further electrical manipulation by electric fields; however, the droplets losecharge over time and must be recharged.

This approach allows some degree ofprogrammatic control, but due to fixed channel geometries it cannot perform arbitraryrouting in a 2D grid. It does, however, avoid surface adsorption since it does not rely on
surface wetting.
Magnetic fields, generated by a two dimensional array of coils, can be used tomanipulate droplets in a programmable manner.

Superparamagnetic beads or

nanoparticles are embedded in each of the droplets, and the local magnetic fields induced18

by the coils can transport and split droplets [Leh07]. In addition to having large forces
and long throw, an advantage of this approach is that the beads can be functionalized for
capturing DNA, viral RNA [Pip07], or for other solid phase extraction. The concern withmagnetic beads and fields is whether or not they are scalable and reusable. In thesesystems, the droplets also contact the surface, which results in adsorption.
A final technique reviewed is thermocapillary flow, which is related, but not
identical, to the approach mentioned in this thesis. The thermocapillary approach uses
microheaters patterned on a substrate [Dar03]. When a finger shaped-film of liquid isplaced near an active heater, the boundary of the liquid tends to move away from theheater (towards the cooler region) due to thermocapillary stresses in the liquid film. This
technique can be used to transport and split liquid films and droplets; however, in order tolocalize the liquids on the substrate, hydrophilic strips must be patterned on the substrate,
which causes surface wetting and can result in contamination. A variant of this techniqueuses an external laser [Kot04] for heating, which simplifies the fluidic substrate, but stillrequires droplet/surface contact.
The technique that will be discussed in this dissertation is the use of Marangoni
flows for manipulating droplets suspended in oil [Bas07A-C]. As mentioned earlier,surface Marangoni flows at small length scales can be created by placing small heatsources above the fluid surface. Droplets suspended near the surface of the oil layer canbe manipulated using these flows. Although this technique does not offer the ability to
split droplets, it avoids all surface contact between the droplets and the system. Having
the heaters above the fluid surface allows the formation of sharp temperature gradients ofvarious shapes, which can generate a number of useful flow patterns for advanced droplet

19control.

X
X
X
X
X
X
X
X

X
X
X
X
X
X
X
X
X

Splitting (Metering)
Simultaneous control(High Throughput)
Avoids surface contact(Reusable)

Merging (Mixing)

Techniques for
Microdroplet
Manipulation
Fluidic channels
Electrowetting
Optoelectrowetting
Magnetic beads
Optical trap
Dielectrophoresis
Marangoni flow
Thermocapillary
Electric Fields

Programmable
Transport

Table 1.1: Techniques for microdroplet manipulation. An ‘X’ is placed in the column if
the technique offers the feature indicated on the top of the respective column

X
X

X
X
X

X

X
X

X

X
X
X
X

X
X

DropletVolumes
pL-nL
200 nL
200 nL
100 nL
fL-pL.1-100nL
500nL
nL
fL-pL

Ref
[Son03][Cho03][Chi03][Pip07][Chi07][Gas04][Bas07][Dar03][Lin06]

A summary of the capabilities of each technique is summarized in Table 1.1. It isclear that no technology to date can perform all the droplet functions in a programmablemanner without surface contact.

It is important, therefore, to continue developing

technologies for droplet control, including the Marangoni effect shown in thisdissertation. Eventually, a combination of the technologies developed will contribute to
the development of a reusable, reprogrammable system for generalized droplet
manipulation.

20

5. ORGANIZATION OF DISSERTATION
Chapter 2 of this thesis explores the effect of the heat source geometry on
Marangoni flow. It is shown that a number of useful flow patterns can be obtained in thinlayers of oil using simple geometries such as point heat sources, lines, rings, and tapered
shapes.

These flows can emulate droplet traps, channels, filters, and pumps, allaccomplishing their functionality without physical structures. Chapter 3 focuses on a
specific pattern called the doublet, which occurs if a sharp linear gradient is imposed on a
low viscosity liquid such as water.

This flow can be used for microfluidic mixing.

Chapter 4 demonstrates a complete system for droplet manipulation using the Marangoni
effect. This system can achieve arbitrary two dimensional control of droplets using a gridof heaters suspended above the oil layer. This system demonstrates simultaneous control
of multiple droplets, as well as droplet merging.

In all of the cases, it is shown thatdroplet velocity can be controlled by adjusting the power to the heat source. In addition
to experimental results, this dissertation presents a supporting simulation model which
reveals the mechanism of operation, and also gives a methodology for predicting
behavior of Marangoni flow at other geometries and length scales.
The three appendices in this thesis describe the microfabricated thermal probes
and probe arrays which were used as heat sources in this work. In addition to their use in
fluidic actuation, these probes are useful in several other areas as well, including
nanoscale imaging and lithography. These were part of early research efforts which are
not in the scope of this thesis, but nevertheless showcase the versatility of the devices
which were designed and fabricated as part of this effort. Appendix 1 describes the probe[Li03], including its structure, fabrication, and integrated features which allow it to21

perform a wide variety of thermal functions. An array of thermal probes [McN04A,
McN04B], fabricated in the same process, is also described.

Appendix 2 presents

simulations which show the thermal interactions between the probe and the liquidsurface, included as supplementary material to the simulations in Chapters 2-4.
Appendix 3 describes a new technique to pattern thin films with high resolution using
heat [Bas04A, Bas04B]. Here, the probe acts as a localized heat source, causing an
irreversible chemical reaction on the surfaces which comes in contact with the heated tip.
This technique is the first demonstration of thermochemical patterning with a heat source,
and it has potential application in maskless lithography.

22

CHAPTER 2:
VIRTUAL MICROFLUIDIC TRAPS, FILTERS, CHANNELS, AND
PUMPS USING MARANGONI FLOWSThis chapter describes several microfluidic components, including traps,
channels, filters, and pumps, for manipulating aqueous droplets suspended in a film of oilon blank, unpatterned substrates. These are “virtual” devices because they have nophysical structure; they accomplish their function entirely by localized variations insurface tension (Marangoni flows) created in a non-contact manner by heat sources
suspended just above the liquid surface. Various flow patterns can be engineered throughthe geometric design of the heat sources on size scales ranging from 10-1,000 µm. A
point source generates toroidal flows which can be used for droplet merging and mixing.
Virtual channels and traps, emulated by linear and annular heat fluxes respectively,
demonstrate nearly 100% size selectivity for droplets ranging from 300-1,000 µm. A
source of heat flux that is parallel to the surface and is triangular with a 10° taper, serves
as a linear pump, translating droplets of about the same size at speeds up to 200 µm/s.
The chapter includes simulations that illuminate the working principle of the devices.
Models show that Marangoni flows scale favorably to small length scales. By using
microscale thermal devices delivering sharp temperature gradients, it is possible togenerate mm/s flow velocities with small increases (<10°) in liquid temperature.

23

1. INTRODUCTION
The primary topic of this thesis is the ability to engineer Marangoni flows to
perform various fluidic manipulations.

Using microscale heat sources of different

geometries, it is possible to shape the surface temperature gradient and the resulting
Marangoni flow. This chapter shows that a number of useful flow patterns can beobtained in thin layers of oil using simple geometries such as point heat sources, lines,
rings, and tapered shapes.
With respect to lab-on-a-chip systems, the purpose of these flows is to enable themanipulation of microdroplets in an oil layer. The flows demonstrated are capable ofemulating the function of droplet traps, channels, filters, and pumps. It is envisioned thatthese virtual components could be integrated into a noncontact microfluidic system
driven only by heat fluxes (Fig 2.1).
Section 2 outlines general theoretical models of Marangoni flow. Section 3 gives
simulation results focusing on each geometry of flow: a point heat source, which
generates toroidal flows useful for trapping particles and droplets; linear heat sources
emulating virtual channels and filters; ring heat sources acting as single droplet traps; andtapered heat sources emulating a pump. Section 4 presents experimental data for eachtype of flow, and Section 5 discusses design and experimental considerations.

24

2. THEORETICAL MODEL OF MARANGONI FLOWSMarangoni flows occur on a liquid-gas interface on which there exists a gradientin surface tension. The difference in interfacial shear stress drives flow tangential to thesurface, directed from regions of low surface tension to high surface tension [Kos93]. In

Figure 2.1: Concept of a contactless microdroplet manipulator based upon Marangoni
flows. The flow is driven by heat sources of various geometries suspended above the oillayer. The projected temperature gradient (shown in red) generates flows which emulate
droplet channels, reservoirs, and mixers.
this work, the surface tension gradient is created by imposing a temperature profile upon
the interface. For most liquids, and for small temperature perturbations, surface tension
decreases linearly with increasing temperature. The temperature coefficient of surface
25

tension σ T can be calculated using the Eötvös law, σ T = k γ Vm

2/ 3

, where Vm is themolar volume of the liquid and k γ = 2.1x10-7 J/K for nearly all liquids [Pil51, Eöt86].
Thus, if a spatial temperature profile is imposed on the liquid surface, it is accompanied
by a corresponding surface tension gradient, and the resulting interfacial shear stress ( τ s )is proportional to the temperature gradient ∇TS . For a Newtonian fluid, the shear stressalso determines the surface velocity gradient, resulting in a surface stress boundary
condition which is the basis of Marangoni flows [Hig00]:
r∂u S
τ s = µ r = −σ T ∇TS (2.1)∂Nr
In this equation, µ is the dynamic viscosity of the fluid, u S is the tangential surfacervelocity vector, and N is the surface normal vector (Fig 2.2). The shear stress and flow

vector is oriented from regions of low surface tension to high surface tension, opposite to
the temperature gradient. The surface Marangoni flow, therefore, is directed away from

Figure 2.2: Theoretical formulation of Marangoni flow driven by a surface temperature
gradient. In this figure showing the liquid cross section, it is assumed that the left side of
the fluid layer is heated, forming a temperature gradient oriented towards the left. is thesurface temperature gradient, is the tangential surface velocity of the Marangoni flow,
and is the surface normal vector. The parallel flow vectors illustrate the typical profile ofsurface and subsurface flow.
26the heat source. It is accompanied by subsurface flow, oriented in the opposite direction,
which provides the return path needed to maintain fluid continuity. The depth at which
the subsurface flow reaches maximum velocity, defined as the inversion depth, depends
on the length scale of the flow and the depth of the liquid. Together, the surface andsubsurface flows create a recirculating cell which is the basis for the all the microfluidic
components to be discussed in this chapter.
To determine the specific geometry and velocity of flow requires a model which
couples the basic fluid mechanics and the temperature gradients.

Higuera [Hig00],

Taslim [Tas89], and Lai [Lai86] have formulated the problem of Marangoni flow in athin fluid layer resulting from a surface heat flux. The problem is posed in either planaror cylindrical coordinates, where x represents the radial distance from the heat source,
and y the vertical position in the fluid of depth h. The two-dimensional, incompressible
flow is governed by the continuity equation (2.2), the Navier-Stokes equations (2.3-2.4),
and the energy equation (2.5):∂v⎛1⎞ ∂ j
=0
xu +
⎜ ⎟
∂y
⎝ x ⎠ ∂x

( )

(2.2)

⎛ ∂u
∂u ⎞
∂p
+ v ⎟⎟ = − + µ∇ 2u
∂y ⎠
∂x
⎝ ∂x

(2.3)

⎛ ∂v
∂v ⎞
∂p
+ v ⎟⎟ = − − ρg + µ∇ 2 v
∂y ⎠
∂y
⎝ ∂x

(2.4)

κ
∂T
∂T
+v
=
∇ 2T
∂x
∂y ρC P

(2.5)

j

ρ ⎜⎜ uρ ⎜⎜ uu

The horizontal velocity, vertical velocity, and temperature are denoted by u, v, and T
respectively. Liquid properties include the density ρ, viscosity µ, thermal conductivity κ,and specific heat CP. The constant g is the acceleration due to gravity. The constant j is27set to 0 if cylindrical coordinates are used, or 1 in a planar coordinate system. In low
Reynolds number flows, which can be assumed at submillimeter length scales, the inertial
terms in the momentum equations are typically small compared to the viscous terms, so
the left hand side of eq. (2.3-2.4) can usually be ignored. The gravitational term in eq.
(2.4), which represents natural convection, is also insignificant as it is known that
Marangoni effect dominates natural convection by one to two orders of magnitude in thin(<1 mm) films of liquid [Kos93]. Finally, it can be assumed that there is negligible
curvature at the liquid interface, which is valid for small values of capillary number[Hig00].
Dimensional analysis can be useful for gaining intuition and predicting generaltrends in the behavior of convective flows without the need for simulations. Convective
flow in thin liquid layers, driven by buoyancy and surface tension, can be reformulatedusing the Boussinesq approximation [Hig00], a slight variation to the conventional formof the constitutive fluid equations. The dimensionless forms of the equations (in planar
coordinates) are as follows:

1 ∂(xu ) + ∂v = 0
x ∂x
∂y

(2.6)

∂p
Ma ⎛ ∂u∂u ⎞⎜⎜ u+ v ⎟⎟ = − + ∇ 2 u∂xPr ⎝ ∂x
∂y ⎠

(2.7)

∂p
Ma ⎛ ∂v∂v ⎞Ra⎜⎜ u + v ⎟⎟ = − + ∇ 2 v +θ∂yPr ⎝ ∂x
∂y ⎠
Ma

(2.8)

⎛ ∂θ
∂θ ⎞
⎟⎟ = ∇ 2θ
+v
Ma ⎜⎜ u
∂y ⎠
⎝ ∂x

(2.9)

The physical parameters and their dimensionless counterparts are listed below.

28

Parameter

Characteristic Value

Temperature∆T0 =Velocityu0 =Pressurep0 =Position

d

q0 h
k

Dimensionless Variableθ = (T ABSOLUTE − T A ) T0
u = u ABSOLUTE / u 0∂σ ∂T ∆T0µv = v ABSOLUTE / v0µvC

p = p ABSOLUTE / p 0hx = x ABSOLUTE / dy = y ABSOLUTE / d

The four dimensionless numbers which govern the geometry and onset of flow include
the Marangoni number, the Rayleigh number, dynamic Bond number, the Prandtl
number, and the Reynolds number.
Ma =ρ ∂σ ∂T q 0 h 2µ k2 c
µ

Pr =

k /c

(2.11)

ρ 2 gβq 0 h 4µ k2 c(2.12)

Raρgβh 2=Ma ∂σ ∂T

(2.13)

Ma
Pr(2.14)Ra =Bo =(2.10)Re =The Marangoni number (Ma) indicates the relative strength of surface tension
driven flow, whereas the Rayleigh (Ra) number is an indicator of buoyancy driven flow.
The ratio of the Rayleigh and Marangoni numbers, the dynamic Bond number (Bo), tells
29which of the two forces is dominant. The Reynolds number (Re), equal to Ma/Pr,
indicates the relative strength of the inertial terms in the Navier-Stokes equations. In
microfluidic laminar flows, where Re is low, inertial terms can typically be ignored. In
this set of experiments, where heat fluxes on the order of 104 W/m2 are applied to mineraloil layers approximately 100 µm thick, the typical values for the Marangoni, Rayleigh,Bond, Prandtl, and Reynolds numbers are, respectively, 88, 0.028, 3x10-4, and 370, and
0.24.

This indicates that, under typical experimental conditions, 1) Marangoni

convection (surface tension driven force) largely supercedes buoyancy driven effects, and2) the flow is laminar.
In addition to the well known parameters for dimensional analysis, Lai [Lai86]
determined the following relations for estimating the radial extent of the flow region (L)and the change in surface temperature (∆T0).
L ~ ( A 2 Ma )1 / 4 ∝ h LR q 0

1/ 4∆T0 ~ ( A 2 Ma ) −1 / 4 ∆TR ∝ LR q 0(2.15)
3/ 4(2.16)

Here, h is the fluid depth, qo is the peak value of the gaussian heat flux, and LR is its
characteristic radius. The radial extent of the flow is a strong function of the liquid depth,
and a weak function of the temperature and diameter (~LR) of the heat source. The
surface temperature increase, meanwhile, depends a combination of the heat flux
amplitude and its width. Both are confirmed in simulations and experimental data.

30

3. SIMULATION RESULTS

In general, the Marangoni flow resulting from a given geometry and magnitude ofheat flux can be computed numerically using a thermal computational fluid dynamics
solver (FLUENT6, Fluent Corp., Lebanon, NH). The simulation model is planar or
axisymmetric as described above, or a full 3 dimensional model as necessitated by thesymmetry of the input heat flux. The software determines the Marangoni flows from agiven heat flux using an iterative procedure which includes the following steps: 1)
calculation of the surface temperature profile gradient using a heat conduction simulation,2) equating the surface temperature gradient to surface shear stress, and 3) solving theNavier Stokes and continuity equations with the shear stress as a boundary condition.
The alteration in the temperature profile as a result of the convective flow is reflected in
the following iteration. The process repeats until the both sets of equations converge.
To model the heat transfer from the suspended heat source, a heat flux is appliedat the fluid surface. For example, in a 2D simulation, a heat flux q(x) is applied to thesurface y = h, forcing a vertical temperature gradient dT / dy = −q( x) / κ at the interface.
The lateral temperature gradient resulting from the heating is equated to a surface stressboundary condition using eq. (2.1). Next, according to the kinematic boundary condition,
the normal velocity at the interface is set to zero. At the bottom surface of the fluid layer,
an isothermal ambient temperature TA = 300K is specified, along with a no-slip boundary
condition. The same condition is applied in the lateral far field boundaries. If an
axisymmetric, planar, or 3D symmetric model is used to model the fluid, then symmetryboundary conditions apply at plane of symmetry. These conditions nullify the orthogonal31

flow velocities as well as the orthogonal field gradients. For example, in the case of a 2D
simulation, u = dv / dx = dT / dx = 0 .
Mineral oils are chosen as the carrier fluids due to their low thermal conductivity
and low volatility. Material properties used in the simulations are as follows [Ber03,
Lai86]: ρ = 886 kg/m3, µ = 0.026 Pa-s, k = 0.12 W/K, CP = 1700 J/kg-K, and ∂σ / ∂T =16x10-5 N/m-K.
Simulations were carried out for each of the four heat flux geometries explored inthis effort, including 1) a point heat source, 2) a parallel, linear heat source, 3) a ringshaped heat source, and 4) a tapered heat source. Each geometry represents a specificmicrofluidic component, and each is discussed in turn.
The point heat source, the most basic geometry, serves as a fluidic trap. The point
source generates radial surface temperature gradients and Marangoni flow directed
outward on the surface, and inward below. In three dimensions, the combined flow
resembles a toroid (Fig. 2.3) which can trap particles and droplets. Due to the axial
symmetry, the point heat source is modeled in a 2-D geometry as shown in Fig. 2.3a.
The fluid layer is meshed with 5 µm square elements, with refinements at the surface
thermal boundary layer, and the symmetry axis.

(q ( x) = q 0 exp − x 2 / r0

2

A Gaussian heat flux

) is applied to the upper surface to represent the heating from thepoint heat source. The heat flux is given a peak amplitude q0 = 6 mW/mm2 and acharacteristic radius ro = 40 µm, corresponding to 20 µW total power at the surface.
These values are chosen to model flow velocities obtained in experiments. The liquidfilm is assumed to be 140 µm thick mineral oil with the properties indicated above.

32

Simulation results are shown in Fig. 2.3 and Fig. 2.4. Contours of the stream
function (Fig. 2.3b), which represent the flow pathlines, convey the unicellular nature of
the flow. If a particle or droplet is trapped in the flow, it continues to travel along the

Figure 2.3: A microfluidic trap generated by a point heat source. (a) schematic showing
the suspended heat source, the projected Gaussian heat flux profile, and the toroidal flow
region in the oil layer. (b-c) Thermal CFD simulation results showing flow resulting
from a Gaussian heat flux with amplitude qo = 6 mW/mm2 and ro = 40 µm applied to a
140 µm-thick layer of mineral oil with surface tension coefficient -0.16 mN/m-K. (b)Contours of stream function, illustrating pathlines in the oil layer. The 20 contours areequally spaced between 0 and 1.5x10-9 kg/s. (c) Temperature profile in the oil layer,
again with 20 equally spaced contours between 300K and 301.4K.

33

Figure 2.4: Simulated spatial velocity profile at various depths of the liquid for thesimulation shown in Fig. 2.3.

streamline unless upset by an external factor.

The maximum surface temperature

increase (Fig. 2.3d) is ∆TMAX = 1.5 K at the center, and it drops off as a Gaussian functionof the radius. This is consistent with the dominance of conduction as the main heattransfer mechanism. (In contrast, the dominance of convection would lead to a wider
spread in the temperature profiles.) The flow velocity profile at the surface and at several
depths below the surface is shown in Fig. 2.4. It is notable that 1.7 mm/s maximum flow
velocity is obtained with only a 1.5 K increase in surface temperature. The maximum
velocity occurs about 40 µm from the center of the heat source, corresponding to thelocation of the maximum temperature gradient. The radial velocity is positive at theliquid surface, reverses direction at approximately 30 µm depth, attains a maximum
negative velocity at 70 µm depth, and eventually diminishes to zero at the interface withthe solid substrate. Simulations at various heat flux amplitudes show a linear dependenceof surface velocity on heat flux - about 1.1 mm/s flow velocity is attained for every 134degree increase in surface temperature. The slope of this function is determined by thesurface tension coefficient ∂σ / ∂T and the surface temperature gradient ∂T / ∂x , thelatter of which depends inversely on the thermal conductivity κ.
In experiments, a microfabricated thermal probe serves as the point heat source.
To model the interaction of the probe with the fluid surface, a full three dimensional
thermal fluid simulation is performed, which includes a 360 x 120 x 3 µm thin film
cantilever probe suspended in air, 15 µm above a layer of mineral oil with thickness 200µm. A heat generation condition of 1.5 mW is applied to a volume at the tip of the probe

Figure 2.5: (a) Three dimensional thermal fluid simulation showing the interactionof a microfabricated thermal probe held above a layer of mineral oil. The numericalvalue of the temperature contours depends on the applied power as shown in part (b);however, the shapes of the contours do not change. Inset shows the qualitative
surface heat flux resulting from the probe held at a 30° angle. (b) Maximum
temperature increase on the liquid surface (∆TMAX) vs. separation between the probe
and the liquid surface. (c) Maximum surface temperature gradient vs. gap. In (b,c),
the diamonds represent simulation results. The lines are a 1/x best fit.

35

to emulate joule heating, resulting in a tip temperature of ~320K.

The resulting

temperature contours (Fig. 2.5) show a sharp vertical gradient between the probe and theliquid surface, and a sharp lateral heat flux gradient due to the length scale. The surface
heat flux results in a lateral temperature gradient that approximately resembles a point
source, although the gradient across the probe is also reflected in the contours. Figures
2.5b-c show a sharp decrease in surface temperature perturbation and surface temperature
gradient as the probe is moved away from the liquid surface. Both fall off as a function
1/g, where g is the gap between the probe and the surface. This is due to the high thermal
resistance of air, and it underscores the importance of maintaining a small air gap for
maximum efficiency. The shear stress corresponding to a surface temperature gradientcan be found by multiplying the temperature gradient by the surface tension coefficient∂σ / ∂T . At a 15 µm gap, the maximum shear stress is 1.6 N/m2, assuming ∂σ / ∂T = -0.16 mN/m.

Another important aspect of this model is to investigate whether theconvective air flow around the probe affects the Marangoni flow in the liquid.
Simulation results show that flow velocities in air are several orders of magnitude lessthan the liquid Marangoni flow; thus, it is concluded that air flow has negligible impact.
One level of complexity above the point heat sources are the linear heat sources,
which emulate virtual microfluidic channels. Virtual channels collect droplets within a
specific size range and confine them within their boundaries. One way to form a virtualchannel is by using two parallel heat sources separated by a spacing s. When placed
above a layer of oil, the sources project two linear heat fluxes on the liquid surface which
define the boundaries of the channel (Fig. 2.6). The range of droplets captured within the36

Figure 2.6: Virtual droplet channels generated by parallel, linear heat sources. The
channel boundaries are defined by the heat flux projected by two heated wires withseparation s held parallel to the liquid surface. Target-sized droplets are pulled into thechannel by the subsurface flows; others are excluded. Marangoni flows are shown ingreen and with arrows.

channel is a function of the spacing, s. Target-sized droplets are pulled into the channel,
while smaller droplets are pushed out by the surface flows.
The mechanism of operation is shown using three-dimensional CFD simulations(Fig. 2.7). In the simulation, a 5 x 5 x 0.2 mm fluid layer is meshed with 10 µm square
elements. The heat flux applied to fluid surface consists of a pair of one-dimensional
Gaussian functions along the horizontal axis, with amplitude q0 = 6 mW/mm2,
characteristic radius r0 = 40 µm, and a spacing of 900 µm between the peaks. This
results in two parallel peaks in surface temperature (Fig. 2.7a,c) as would be expectedfrom two linear sources. The resulting Marangoni flow is comprised of two circulating
cells on opposite sides of the heat sources, and a relatively still region between them.
Surface flows are directed away from the virtual channel, and subsurface flows are
directed toward it. A droplet of appropriate size is pulled into the channel by thesubsurface flows, which apply a lateral force to the center of mass of the droplet. The
37

Figure 2.7: Simulations of virtual channels formed by either two parallel heat fluxes
with spacing s, or, alternatively, a single linear source with width w. (a,c) show thetemperature profile and flow vectors for 2 parallel linear heat sources with a spacing s= 900 µm. (b,d) shows the same for a single line heat source with width w = 350 µm.
In each case, surface temperature profiles are drawn above the flow vectors.
Simulations assume a 200 µm-thick mineral oil layer with a surface tension coefficient-0.16 mN/m- K. Heat flux amplitudes are Gaussian with amplitude 6 mW/mm2 andradius 40 µm. uMAX is the maximum horizontal flow velocity, and ∆TMAX is the
maximum surface temperature change.

surface flows, meanwhile, apply only a tangential force on the top side of the droplet and,
therefore, do not cause lateral movement. In contrast, a smaller droplet, whose center ofmass is closer to the surface, is pushed out of the channel by the surface flows and is,therefore, excluded. The distinction between ‘large’ and ‘small’ droplets is a function ofs.
Another way to create a virtual channel is with a single line heat source instead oftwo parallel sources (Fig. 2.7b,d). In this case, the channel size and the droplet sizeselectivity are defined by the width of the heat source (w) rather than the spacing s.
Simulation conditions are identical to the previous, except that the applied surface heat38

flux includes only a single peak, and the characteristic radius is increased (ro = 175 µm)
to represent a wider heat source. Simulation results illustrate the differences in flow
patterns of the double and single line heat sources. The recirculating flows present insidethe double line channel do not appear in the single line version; however, these internal
flows do not affect the trapping capability of the channel. The double line heat source
offers some flexibility in that the virtual channel region can be easily tuned wider than
the single line channel for trapping larger droplets. It is notable that in both cases, up to 4
mm/s surface velocities can be obtained with <6 °C change in surface temperature, again
illustrating the potential efficiency of Marangoni flows. The subsurface flows are only
about 1/3rd the velocity of the surface flows, but they are sufficient to pull in selected
droplets. Experimental results will be discussed in the following section.
A single droplet trap can be implemented using an annular heat source (Fig. 2.17).
Compared to the parallel heat sources, the cross section of the flow vectors are identical;
however, when viewed from above, the flow pattern is axially-symmetric about the heatsource.

With respect to droplet manipulation, the primary difference between thiscomponent and the channel is that the droplet can be confined in both lateral dimensions.
The trap is useful as a reservoir for holding single droplets, and for moving droplets if theheat source is translated laterally. On a broader note, a particularly interesting aspect of
this flow pattern is the isolation of the fluid region within the confines of the ring.
Simulations and experimental results show that the fluid within the ring boundary
circulates independently and does not flow into the outer bulk fluid. In a sense, the innerand bulk fluid are doubly separated by two walls of co-rotating flows. This suggests thata ring heat source may have potential use as a fluid isolator outside the context of droplet

39

systems.
In the simulation model, the heat flux profile is an axisymmetric ring shape, thecross section of which consists of Gaussian peaks at a radius of 300 µm. The amplitudeand characteristic width of the Gaussian profile is maintained at the same values as priorsimulations (q0 = 6 mW/mm2 and ro = 40 µm).

Figure 2.17b shows the surface

temperature profile (∆TMAX = 6°C) and flow resulting from a ring-shaped heat source in a
200 µm-thick layer of mineral oil. For clarity, the arrows show only the subsurface flows(140 µm beneath the surface) since they are the ones for droplet trapping. The flow canbe divided into two distinct regions. Flow vectors outside the perimeter of the ring areoriented inward, and these flows push the droplet to the center. The maximum flow
velocity in this region is 1.3 mm/s. Inside the perimeter of the ring, the subsurface flows
are oriented outward, reaching a peak velocity of 0.8 mm/s; however, these flows do notaffect the trapped droplet because the lateral forces they impart on a trapped droplet aresymmetric and therefore cancel each other. Target-sized droplets, therefore, remain
stable at the center of the ring. Like the earlier geometries, smaller droplets are rejectedfrom the trap by the surface flows (not shown), which are oriented opposite thesubsurface flows. Thus, the size exclusion capability applies to the annular geometry as
well.
A fundamental component of any fluidic system is a pump.

With noncontact

Marangoni flows, pumping or actuation of droplets can be accomplished by two methods.
The first is simply a consequence of the trapping: the heat source projecting a channel ora trap can be translated physically with respect to the substrate, and the trapped droplets
follow it.

However, droplet actuation can be also accomplished by steady-state,40

motionless heating provided by a tapered shape and angled spacing (Fig. 2.18). The
tapered geometry provides a triangular heat flux on the fluid surface and a temperature
gradient oriented in the direction of increasing width. It can be simulated by applying a
triangular heat flux with amplitude 6 mW/mm2 and a 10° tip angle on a 500 µm square,
140 µm-thick layer of mineral oil. This results in a triangular temperature profile with amaximum temperature increase of ∆TMAX = 5°C on the fluid surface. The resulting
subsurface flows (Fig. 2.18b) are biased in the direction of increasing taper, and can pull
appropriately sized droplets along the length of the guidewire. The maximum subsurface
flow velocity of 1.5 mm/s can be found near the tip of the guidewire. The surface flows(not shown) have velocities roughly 3x larger than the subsurface flows and are biased in
the opposite direction. As before, the surface flows affect only the small droplets,
rejecting them from the guidewire.

4. EXPERIMENTAL RESULTS

Marangoni flows from point heat sources were obtained with a micromachinedpolyimide-shank thermal probe [Li03] which provides high thermal efficiency, sharp
temperature gradients, and controllable temperatures. The probe consists of a 40 x 360 x
3.5 µm polyimide cantilever with a thin film heater near the tip which provides control ofthe probe power and temperature.

The probe was mounted on a motorized

micromanipulator stage (MP-285, Sutter Instruments, Novato, CA) and suspended abovea 140 µm thick layer of mineral oil (Mineral Oil USP, Rite Aid Corp., Harrisburg, PA).
The thickness of the oil was measured optically. Flow velocities were measured at input
powers ranging from 5-20 mW and at air gaps ranging from 20-320 µm. Weed pollen
41

(25 µm diameter, Sigma-Aldrich, St. Louis, MO), was immersed in mineral oil to serveas tracer particles in characterizing the flow, and also for demonstrating particle
collection. Particle displacements were tracked using a CCD video camera (DXC-107,
Sony USA, Culver City, CA) mounted on a stereomicroscope (SZX12, Olympus Corp,
Center Valley, PA). Video clips were analyzed frame by frame to determine the positionof a selected particle at 1/30 second intervals. Velocities were obtained by dividing thedisplacement over the time interval.

Figure 2.8: Experimental velocity profile of a toroidal flow cell in 140 µm-thickmineral oil obtained with a thermal probe and the experimental conditions shown in the
figure. (a) Radial displacement of a selected particle from the toroid center graphed asfunction of time over two oscillation cycles (b) Particle velocity graphed as a function of
the radial position for two cycles, obtained by taking the time derivative of thedisplacement data. The particle follows a clockwise path; outbound velocities are
positive; inbound velocities are negative.

42

Experimental flow velocities from a point heat source are shown in Fig. 2.8. The
spatial velocity profile, obtained by differentiating the displacement data in time, closely
resembles the simulation results which used Gaussian heat fluxes with q0 = 6 mW/mm2
heat fluxes and r0 = 40 µm. The probe width itself is about 40 µm, showing reasonable
correlation with the simulation.

Flow velocities reach a maximum of 1.7 mm/s.

Although it is not feasible to accurately measure the temperature profile, the 1.5K surface

Figure 2.9: Control of flow velocities with toroidal flows generated by amicrofabricated point heat source. (a) Flow velocity vs. input power to the thermalprobe plotted for three different separation distances. Also shown are simulated flow
velocities as a function of input power. In the simulation, a Gaussian heat flux ofincreasing amplitude was applied to a 2D, axisymmetric fluid layer. (b) Experimental
flow velocity vs. separation with experimental conditions as shown. A 140 µm layer ofmineral oil was used in all experiments and simulations.

43

temperature elevation found in simulations suggests that Marangoni actuation requires
only small increases in surface temperature in order to function.
Figure 2.9a demonstrates the linear relationship between heat flux and flow
velocity found in both simulations and experimental results. The linear offset in theexperimental data was the result of an inadvertent photothermal effect: due to the highthermal isolation provided by the polyimide cantilevers, the microscope lamp heated theprobe tip enough to create a non-zero velocity even when no electrical current wasapplied to the probe. Nevertheless, it can be seen that velocities scale approximately
linearly with increasing power, and decreases exponentially with increasing separation
between the probe and the liquid surface.
Marangoni flow in the reverse orientation can be generated by using a coolingpoint source rather than a heating source. The point cooling source is made using a

Figure 2.10: (a) Cold probe experimental setup. (b) Collection of particles using reverse
Marangoni flow44

plastic syringe tube filled with dry ice. Styrofoam is wrapped around the syringe toprovide thermal insulation. A metal wire protruding from the syringe acts as the tip; thiswire is also wound along the inside of the syringe to maximize the heat transfer between
the wire and the ice. Typical temperatures on the metal tip are between -10 and -20°C.
Fig. 2.10 shows the experimental setup where the syringe is held above the glass slide on
which the sample is placed.

Reverse flow is demonstrated using Ф=25µm pollen

particles immersed in a 300 µm-thick layer of mineral oil (Fig. 2.10b). The probe is held

Figure 2.11: Effect of fluid depth. a) Radius of the convective region as a function of
fluid depth. b) Peak radial velocity as a function of fluid depth. In both graphs,
experimental conditions are as follows: probe type (R01, 35 Ω), input power=18 mW,
air gap=100 µm, and the liquid is mineral oil. Simulation conditions: q0 = 6000 W/m2,
r0 = 50 µm, and mineral oil properties are used.

45

above the fluid layer for 10s, after which the aggregation of particles can be seen. The
aggregation is the result of surface Marangoni flow directed towards the cooling source.
Due to condensation and ice formation, the cooling source is not practical for general use,
and therefore the remainder of the chapter returns to heating sources.
Localization of the flow cell is an important parameter needed to selectively trap
particles. Figure 2.8b shows that the flow cell is confined to an approximately 300 µm
radius from the center of the heat source. The radial extent of the flow can be madesmaller by using a thinner fluid layer; however, it should be noted that flow velocities

Figure 2.12: Applications of the toroidal flow pattern in particle and droplet collection.
(a) Schematic showing the heat source, XY scanning stage, toroidal flow patterns, andparticles trapped within the collection area. Collection of (b) weed pollen in 125 µm
mineral oil, and (c) 1 second exposure fluorescent image illustrating the movement ofwater microdroplets containing fluorescent dye.

46

diminish in a thinner layer due to increased viscous forces between the flow layers (datanot shown). Simulations and experimental results of the radial extent of flow versus fluid
thickness show reasonable agreement (Fig. 2.11). In the simulation, an axisymmetric
Gaussian heat flux with q0 = 6 mW/mm2 and radius r0 = 50 µm was applied to a mineraloil layer. In the experimental data, a 40 x 360 x 3.5 µm probe with 18 mW applied
power was placed approximately 100 µm above the mineral oil layer.
Highly localized Marangoni flows can be useful for trapping and manipulating
particles (Fig. 2.12). For example, the thermal probe can be suspended above the liquidsample on an XY scanning stage so that the collection region can be shifted laterally. In
one demonstration (Fig. 2.13), a thin fluid layer (80 µm) is used to minimize the radius of
the collection region and a low viscosity dielectric liquid (EDM-185, Commonwealth
Oil, Harrow ON) is chosen to help offset the increased shear that occurs in thin liquid

Figure 2.13: Collection of 25 µm weed pollen using local toroidal flows. (1) The heatsource is first advanced towards the particles. (2) When the heat source reaches the area
above the particles, the particles are swept into the vortex and trapped. (3-4) The trapped
particles are moved to a new location and released by turning off the heater.

47

layers. Figure 2.13(b-d) illustrates the harvesting of 25 µm diameter weed pollen with alocalized collection region of 50 µm radius. In this experiment, the pollen particles were
immersed in the 80 µm-thick dielectric oil, and an 18 mW heat source was held 50 µm
above the oil surface and scanned as indicated. The micrographs show that as the heatsource is scanned laterally, the particles are swept into the flow cell and transported with
it. Particles are released by turning off the heat source. The notable aspect of thisapproach is that the heat source does not physically contact the liquid or the particles.

Figure 2.14: Droplet merging of four droplets with (φ = 200-400 µm). (0s) The droplets
are trapped in the self-circulating convective flow. (2s-9s) The droplets merge together,
one by one, eventually forming a single, φ = 600 µm droplet.

48

By using the same approach, it is possible to collect and merge microdroplets withradii ranging from 5-100 µm. The ability to merge discrete droplets is important inmicrodroplet systems, as it allows reagents to be mixed at millisecond time scales, fastenough to study chemical kinetics [Son03]. When brought in contact with one another,aqueous droplets spontaneously merge unless treated with a stabilizing surfactant. To
demonstrate droplet collection and merging, a 650 µm diameter, 80°C wire tip was
suspended < 100 µm above mineral oil which contained droplets with diameters 200-400µm. The heat source collects droplets in the regions over which it is scanned. Droplets
trapped in the flow eventually collide and merge with one another (Fig. 2.14). By
scanning the heat source over a large area, many droplets can be collected and merged inthis manner.
A third interesting capability of a point heat source is the ability to rotate and mix
individual droplets. In general, when the particles and/or droplets immersed in the oil aresmall compared to the cross-sectional height of the convective flow region, they follow
the toroidal streamlines. However, when the height of the flow region is approximately
the same as the droplet diameter, the recirculating currents can rotate and mix the droplet
in various patterns depending on the size of the heated tip (Fig. 2.15). In the case where
the tip diameter is approximately the same size as the droplet, the Marangoni flows canrotate the droplet at high speeds. For example, if a 650 µm-diameter heated tip (T≈40°C)
is placed near a droplet of the same size (Fig. 2.15b) in an 800 µm-thick mineral oil layer,
single axis rotation is observed at rates up to 300 rpm. In the case where the tip diameter(50 µm) is smaller than the droplet (1000 µm), the flow pattern is instead composed of
two vortices within the droplet (Fig. 2.15b). Both of these manifestations can be useful49

for micro mixing within a single droplet.

Figure 2.15: Droplet rotation and mixing. (a) Schematic showing Marangoni flows arounda suspended droplet which can rotate the droplet. (b) Experimental results showing single
axis rotation up to 300 µm/s obtained when a 650 µm diameter tip is placed near a droplet
of approx. the same dimensions. The tip temperature was ≈40°C. Flow patterns arevisualized using immersed fluorescein particles and a 0.5 second CCD exposure with 490
nm/500 nm excitation/emission filters.

With the intent of demonstrating the simplicity and generality of droplet
manipulation methods, the demonstrations of droplet merging, rotation, and mixing werecarried out simply with a heated metal tip rather than the microfabricated thermal probe.
Although not as thermally efficient or as small as the microfabricated heat source, the useof simple metal structures demonstrates the versatility of this technique. In the same
spirit, simple metal structures are used to represent the ring, linear, and tapered heatsources discussed in the remainder of this chapter.
50

Virtual droplet channels, generated by linear heat sources, were experimentally
verified by placing two parallel, cylindrical metal structures above a thin layer ofphenylmethyl polysiloxane oil (Corning 550 Fluid, Dow Corning, Midland, MI). Thisparticular oil was chosen for its high density (specific gravity = 1.07), which causes theaqueous droplets to float on the oil surface. The suspension of the droplets is criticalbecause droplet manipulations depend on the surface Marangoni flows. It also prevents
contact between the droplet and the glass slide below. Droplets with diameters ranging
from 20-2,000 µm were generated by pipetting 5 µL of deionized water into the oil andstirring vigorously. The metal structures, with spacing s = 600 µm and s = 900 µm, werelocated 200-400 µm above the oil surface and heated to approximately 110 °C. The size

Figure 2.16: Size selective filtration of droplets in virtual channels. (a) Micrographs
showing two 500 µm-diameter droplets (circle) entering the channel while a smaller one(square) is rejected. (b) Histogram showing the size selectivity of two droplet channels
with 600 µm and 970 µm spacing. Droplet statistics were compiled over video clips
spanning 40 minutes. Bins are in 100 µm increments.

51

selectivity is demonstrated by time-lapse images in Fig. 2.16, which show that droplets
within a specific size range move into the channel, while smaller droplets are actively
removed by the Marangoni flows. Very large droplets are unaffected by the flows, andtherefore are not actively recruited into the channel.
The ability to tailor the size selectivity of the channels is quantitatively shown in
Fig. 2.16b. A histogram of droplet capture vs. droplet size is shown for the two channels
with different spacings (s). When s = 600 µm, the minimum diameter for entry into thechannel is 250 µm, and when s = 970 µm, the minimum diameter is 350 µm. A sharptransition can be seen in both cases, and nearly 100% exclusion of off-sized droplets isshown. Therefore, these channels inherently provide a size-based filtration capability.
Figure 2.17c shows experimental results for the annular heat source functioning asa droplet trap. A rectangular ring-shaped metal pin (T ≈ 120°C, s = 600 µm) wassuspended 200-400 µm above the oil layer to approximate an annular heat flux. The
micrographs show that a 700 µm-diameter droplet is actively pulled into the trap, driven
by the subsurface flows directed into the center of the trap. If the trap boundary is moved(by the translation of the substrate or heat source), the droplet follows it. The process isrepeatable, and the droplet velocity, as it enters the trap, is approximately 200 µm/s.
Experimental confirmation of the guidewire pump (tapered heat source) is shownin Fig. 2.18c. To create the surface heat flux, a steel needle (T≈130°C) with 10° lateraltaper, and a 5° taper in vertical spacing was placed ≈200 µm above the fluid surface.
Time lapse images show a 523 µm-diameter droplet pulled along the axis by virtue of the
Marangoni flows. The droplet moves quickly when first approaching the tip of the heat
flux and continues to move in the direction of increasing taper, achieving a maximum

52

velocity of 196 µm/sec at the tip end of the guidewire (i.e., the location of greatest axial
temperature gradient).

Figure 2.17: Single droplet trapping with an annular heat flux. (a) Schematic illustrating
the annular heat flux projected on the surface, the trapped droplet, and the exclusion oflarger or smaller droplets. (b) CFD Simulation. The shaded contours represent thesurface temperature gradient, with evenly spaced contours and a maximum temperature
increase ∆TMAX = 6°C. White arrows represent the subsurface flow at 140 µm depth
beneath the surface. The two regions of flow are marked with dashed lines. (c)Micrographs showing strong affinity of a 1 mm droplet to the annular heat source(T≈120°C). Gap is ≈200 µm.

53Figure 2.18: Guidewire pump emulated by a tapered heat source. (a) Schematic showing
the orientation of the triangular heat flux projected on the fluid surface, and a droplet
being pulled in along its longitudinal axis. (b) CFD Simulation. Shaded contours
represent the surface temperature gradient, and white arrows represent the subsurface flow
(140 µm depth) which pushes the droplet from left to right. (c) Micrographs illustrating
movement of a droplet at 196 µm/s driven by a suspended heat source (T≈130°C) with 10°
lateral taper and a 5° taper in vertical spacing. Gap is ≈200 µm.

5. DISCUSSION

It is clear that the Marangoni technique relies on the ability to produce sharp andaccurate temperature profiles on the liquid surface. Given the relatively high thermal
conductivity of most liquids, it is difficult to achieve sharp surface temperature gradients54

if the heaters are embedded within the fluid. By contrast, placing the heat sources above
the liquid benefits from the low thermal conductivity of air, which is nearly an order ofmagnitude less than oil. This limits lateral heat conduction and allows the formation of
sharp surface temperature gradients at the resolution needed to obtain shaped temperature
profiles at the sub-millimeter scale. An added benefit is that the heaters do not contact
the sample, obviating contamination concerns.
With regards to reconfigurability, one of the projected advantages of this type ofapproach is that the substrate itself remains unpatterned. The complexity and burden of
the fluid actuation is essentially placed to the suspended heating structures rather than thefluidic substrate. Since the heating structure can be reused and reconfigured, this canlower the overall cost of repeated experiments.
To achieve the sharpest temperature gradients on the liquid surface, it is importantto place the heat sources as close to the surface as possible, since heat spreads
isotropically in the air gap. Typical gaps on the order of 100-400 µm can be obtained byvisual estimation during the approach of the heat source to the sample surface. An
automated technique which would allow for small air gaps would greatly benefit
efficiency, as simulations indicate that when the gap is less than 100 µm, both the surface
temperature gradient and resulting velocity sharply increases.
Another benefit of placing the probes close to the surface is lower power
operation. Although the low thermal conductivity of air helps achieve a sharp lateral
gradient, it also reduces the heat transfer from the heat source to the liquid surface.
Experimental results with the microfabricated thermal probe show that approximately 10
mW of heat power must be dissipated in order to generate 1 mm/s flow velocity.

55

Simulations, however, indicate that <0.2 mW of surface heat flux is needed to generate
the same flow velocity. The discrepancy between the two arises due to the poor heattransfer between the probe and the liquid surface. Three dimensional heat conduction
simulations of the probe above the liquid surface show that at a 100 µm separation, thesurface temperature rise is only 1.3% that of the probe. This figure drops to only 0.3% if
the gap is 300 µm. As shown earlier (Fig. 2.5), there is an approximate 1/x dependence
on the surface temperature rise vs. the probe-liquid separation.
An equally important way to improve efficiency is by optimizing the heat source.
Microfabricated heaters with well-designed thermal isolation can achieve thermal
resistances in the range of 10,000 K/W [Li03], and thermal masses of only 10-9 J/K. This
enables temperatures of 100 °C with <10 mW of input power, and dynamic heating times
on the order of 10 ms. In these probes, the relatively small thermal losses are due to
conduction through the probe shank. Thus, the efficiency can be further improved byusing a thinner cantilever or lower thermal conductivity materials in its fabrication. With
the existing devices, the best power efficiency, obtained experimentally at a 30 µm gap,
is about 1 mm/s per milliwatt input power, reaching a maximum liquid velocity of 1700µm/s with < 20 mW input power to the probe.
The ability to localize flow is an important aspect as well. Fig. 2.11 shows thatthe radius of the collection region scales with the thickness of the liquid layer, andintuitively, it would also scale with the size of the heat source. The former approach issimpler, but the latter offers the ability to accommodate a larger range of droplet sizes.
The smallest flow cell observed was a 50 µm diameter toroidal flow, obtained using athermal probe above 80 µm thick low viscosity oil.

56

Another purpose of this effort was to show that even simple metal tools can beused to generate Marangoni flow which can emulate microfluidic components. Because
these components are larger in size (a few mm) than the microfabricated probe (< 100µm), they cannot generate as sharp a gradient. Thus, a larger absolute increase intemperature is needed to drive flows at the same rate. In the case of the tapered, ring, andlinear geometries, the heat source temperatures are between 80-120°C, and the liquidsurface temperatures are measured to be 10-40° above ambient.

This temperature

requirement can be reduced by scaling the heat sources to smaller sizes.
Overall, scaling down to smaller length scales can potentially provide significant
performance benefits. For example, the microfabricated thermal probe used in this work
obtains temperature gradients of up to 1 K/µm (106 K/m) along a 200 µm-long cantilever.
Experimental and simulation data using this probe show that on the liquid surface, thetypical temperature gradient ranges from 1-10 K/mm, resulting in shear stresses between
0.1-1 N/m2 and velocities between 1-10 mm/s on a 200 µm thick oil layer.
Hypothetically, if the thermal gradients on the microfabricated probe (up to 106 K/m)
could be directly transferred to the fluid surface without loss, this could result in shear
stresses up to 100 N/m2, and theoretical velocities above 10 cm/s (if viscous resistancecan be minimized). Although this is not possible in the existing setup, it does illustrate
the favorable scaling of this technique, and the potential to achieve high speed flow.

6. SUMMARY

This chapter has shown that microfluidic Marangoni flows can be engineered
through the geometric design of the heat flux. A surprising number of microdroplet
57

operations, including mixing, confining, filtering, trapping, and pumping, can beemulated through the creative use of surface and subsurface flows. As a noncontact
technique, these virtual components avoid many of the contamination issues which limit
many microfluidic technologies. The future direction of this research is to integrate
several of these components into a usable system for droplet manipulation.

A systemwith programmable heat fluxes may also be useful for research applications which
require flexibility and reusability over portability.

58

CHAPTER 3:
HIGH SPEED DOUBLET FLOW
The toroidal flows described in Chapter 2 are consistent with flow patterns driven
from thermal monopoles, i.e. a point heat source. Doublets, in contrast, are consistent
with thermal dipoles. This chapter describes doublet flow patterns, which have potential
utility in microfluidic mixing. Section 1 begins with a background on microfluidic
mixers. Section 2 introduces basic concepts and describes how doublets may be driven
by thermal probes. Section 3 gives a theoretical model, presenting two theories fordoublet formation. Section 4 gives experimental results of a typical doublet, and also
describes how i) flow can be reversed by changing the angle of the cantilever, and ii) how
multiple heat sources (i.e., the thermal probe array) can be superimposed to generateuniform flow.

1. BACKGROUND

The ability to generate high speed micro-flow patterns plays a critical role in the
mixing, pumping, and pre-concentration of particle solutions, particularly for cellular andbiomolecular manipulations. It is well known that microfluidic mixing is difficult at the
micro-scale due to laminar flow, which causes conjoined fluid streams to remain separate
rather than intermix. Active mixing via chaotic advection [Mel96, Aref84] requires thatthe fluid is folded or turned, but the planar nature of microfabricated devices makes the59Figure 3.1: Schematic of doublet flow generation. The heated thermal probe, whensuspended above a liquid, induces a high-speed doublet flow pattern at the surface.

fabrication of mechanical mixing components difficult and exceedingly costly. For thisreason, alternative mixing techniques have been sought, many of which focus on
generating in-plane vortex flow without mechanical components.

An opto-electrostatically driven vortex pattern generated by a focused 50 mW laser spot in
combination with a 2 kV/cm electric field was shown to have a maximum particle
velocity of 120 µm/s in conductive liquids [Miz93]. Vortices driven by electrokinetic
instability formed in polymer channels with patterned surface charges [Odd01] operate
on a smaller electric field (100 V/cm), but produce slower velocities and require ionicsolutions [Hau03]. Pressure differentials and dielectrophoresis [Lee01] are other active
methods for generating vortices for active mixing.

60

Combining a fluidic source and sink in a planar liquid layer forms the well known
doublet flow pattern, which contains two adjacent vortices useful for mixing. Althoughrarely observed in nature, doublet flows can be realized by placing a drain in a fluid layer
and pumping the drained fluid into an adjacent region. Such extraction/injection wellpairs have been implemented at very large scales because their mixing characteristics
efficiently purify groundwater [Luo04, Gan02].

Evans [Eva93] and Cola [Col06]

implemented source-sink pairs in microfabricated devices to facilitate advective mixing.
A mixing chamber was flanked by channels which either pumped fluid away or into thechamber in a pulsatile fashion. Efficient mixing was demonstrated; however, the devices
did require mechanical actuation, provided by either integrated [Eva93] or provided by
off chip components [Col06].
Here, we show that a high speed fluidic doublet, with rotational velocities of up to
1200 rpm and linear velocities of 5 mm/sec, can be realized on a thin aqueous layer
placed on a glass slide, without a fluidic chip or pumps. The doublet is driven by thethermal probe suspended above the liquid surface (Fig. 3.1). Since the probe has nomoving parts and makes no contact with the liquid, common problems of mechanicalwear, electrode contamination, and bubble generation, can be avoided. The techniquedoes not require ionic or conductive liquids.

2. TEMPERATURE GRADIENT THEORY

A doublet, the fluidic analog of a magnetic or electric dipole, is a two dimensional
planar flow pattern consisting of two adjacent vortices of opposing rotational directions,and resulting linear streamlines between them (Fig. 3.1). This chapter presents two
61

Figure 3.2: Simulation of doublet flow due to surface momentum.

theories on how doublets can be formed.
The first theory considers the sharp temperature gradient formed across the lengthof the thermal probe. When the probe is placed near the liquid surface, this gradient ismirrored on the surface as shown in Fig. 3.1a. A simple point heat source would create
axially symmetric temperature gradients, which does not generate doublet flow.
However, a linear gradient imposed on a small region on the fluid surface can create alocal pumping effect similar to the tapered heat source geometry discussed in Chapter 2.
Through the Marangoni effect, this local gradient results in the application of stress andmass flow to the fluid layer.
The local pumping effect can be simulated using commercial CFD software(Fluent 6.0, Fluent Corp.).

A two dimensional fluid layer with dimensions

300µmx300µm is meshed with 2 µm square elements, and a linear momentum of 1018

62

kg-m/s per m2 is applied to a 20x20µm region in the center of the fluid layer to model the
local velocity due to the thermal gradient. Simulation results (Fig. 3.2) demonstrates
doublet flow matching in scale and geometry to experimental observations.

3. SOURCE/SINK THEORY

Another way a doublet can be generated is if a fluidic source and fluidic sink areplaced next to one another. The source/sink model is particularly useful for deriving
analytical relations because the source, sink, and doublet are all 2 dimensional planarpotential flows which can be described by their respective stream functions ψ.

Thefluidic source is a point from which fluid flows radially outward, and a sink is a point towhich fluid flows inward (Fig 3.2a). For a source or sink located at the origin, therespective stream functions in polar coordinates are:

ψ SOURCE (r ,θ ) =m
θ , and
2π

(3.1)

m
θ
2π

(3.2)

ψ SINK (r ,θ ) = −The constant m is the volumetric flow rate, and is related to the radial velocity
through the relation m = 2πrVr. Flow resulting from the combination of a source and sinkcan be found by adding the contributions respective stream functions, using the principleof superposition. If a sink and source of equal strength m are placed at (-a,0) and (a,0) in
a Cartesian plane, the resulting doublet flow can be expressed asψ D ( x, y ) = ψ SOURCE + ψ SINK = −m⎛ 2ar sin θ ⎞tan −1 ⎜ 2
2 ⎟2π⎝ r −a ⎠(3.3)

where x = r cos(θ ) and y = r sin(θ ) . If the separation 2a is small, the doublet equation
63

simplifies toψD ≈ −

ma r sin θ
ma
y
=
2
2
2
π (r − a ) π x + y 2 − a 2(3.4)

Here, the product ma, also called the dipole moment, reflects the strength of the doublet.
As the distance between the source and sink becomes small, m must increase
proportionally in order to maintain the strength of the doublet. The doublet stream
function is related to its velocity vector (u, v) as:⎞dψ ma ⎛⎜
x2 − y2⎟=π ⎜⎝ (x 2 + y 2 − a 2 )2 ⎟⎠
dy

(3.5)

dψ ma
2 xy
=
2
π (x + y 2 − a 2 )2
dx

(3.6)

u=

v=−

Fig. 3.2 shows the theoretical model geometry of the source and sink as well as
the streamlines (Eq. 3.4) and velocity contours (Eq. 3.5) for a doublet with a dipole
moment 25x10-6, similar to that of experiments.
One way doublet flow could occur on the surface of a liquid layer is if both thesink and source singularities are realized. A source could be realized by simply heating apoint on the fluid surface, as was shown in the previous chapter. The sink, on the other
hand, could occur from two possible means. The first is by mass loss via evaporation. A
local evaporative mass flux acts as a drain, removing fluid from the surface and thus
pulling in fluid from the surrounding regions. The second possibility is evaporative
cooling. As the evaporating water undergoes phase transition, a relatively large amountof heat is absorbed due to the high latent heat of evaporation of water, resulting in anegative heat flux on the water surface [Car92],

64

QEVAP = − J EVAP LV(3.7)

given in W/m2. JEVAP is the evaporative mass flux (J/m2-s), and LV is the latent heat ofvaporization (J/kg). This localized cooling, through the Marangoni effect, also causes
fluid to flow radially inward.
In thin layers of water, which has a high latent heat (LV = 2.44x106 J/kg), theevaporative cooling effect is often dominant over the mass flux in forming sink flow
[Hu03]. This is demonstrated in two numeric simulations of localized evaporation in a
20 µm thick layer of water, conducted in FLUENT (results not shown). In the firstsimulation, the latent heat is assumed to be zero, so that only the mass flux determines the

Figure 3.3: Theoretical doublet model. (a) Schematic of doublet geometry illustrating asink to the left of the origin and a source to the right of the origin. Velocity is calculated
at an observation point P. (b) Streamlines of a doublet with dipole moment 25x10-6,
plotted using Eq. 3.4. (c) Contours of x velocity for the same doublet, plotted usinq Eq.
3.5.

65

flow. Assuming a 20 µm square area with a 7 g/m2/s evaporation rate, velocities are
generally < 10 µm/s. In the second simulation, where latent heat and Marangoni effects
are included, the velocities are 3 orders of magnitude larger. The simulation, therefore,suggests that the fluidic sink is more likely to be a result of the Marangoni effect rather
than simply mass loss.
We now develop a model for localized evaporation. The evaporation at a liquidgas interface is given by [Car92, Hu05]:
J EVAP = − D∇CV

(3.8)

where JEVAP is the evaporative mass flux, D is the diffusion coefficient of water vapor inair, and ∇CV is the water vapor gradient perpendicular to the liquid surface. It should be
noted that at the liquid surface, the water vapor concentration is always equal to thesaturation vapor concentration, which depends on fluid temperature. The gradient inconcentration at the fluid surface is what determines the evaporation rate.
A thermal probe suspended above the liquid surface can cause high evaporation
rates in one of two possible mechanisms. It is well known that, at ambient temperatures,
many materials are covered with a thin water film [Car92] often < 100 nm thick.
Thermal and AFM probes are no different; however, studies have shown that when athermal probe tip is heated, it rejects the formation of water meniscus [Lef05]. In a
simplified model, it is assumed that the water concentration on the heated probe tip iszero; therefore, the vapor concentration is also zero at the probe tip. As mentioned
earlier, at the surface of a liquid layer, the vapor concentration is equal to the saturation
vapor concentration [Hu03]. Thus, placing the tip in proximity to the liquid surface
forces a sharp concentration gradient66∇CV = (CVPROBE − CVSURFACE ) / g = −CVSAT / g(3.11)

where g is the space between the probe tip and the substrate. Assuming a gap of 15 µm
and a saturation vapor concentration 22.8 g/m3 (room temperature), the evaporation rate
is 40 g/m2/s, roughly 20 times higher than the first model. In this case, the corresponding
heat flux is ~ -105 W/m2, which is approximately the heat flux required to demonstrate
doublet flow in simulations.
A second mechanism is also proposed; however the theoretical evaporation rates
are lower. The basis for this mechanism is the sharp temperature gradient that exists
between the probe and the liquid surface, as was shown in chapter 2 (see Fig. 2.4). The
steep thermal gradient in the air is due the relatively low thermal conductivity of air
compared to the liquid. The ideal gas law states that the concentration of the vapor CV isinversely proportional to its temperature T.

The density gradient with respect totemperature can be found as follows:CV =PV ⋅ MWV∂CP ⋅ MWV⇒ V =− V
RT
∂T
RT 2

(3.9)

For water, the vapor pressure PV is the saturation vapor pressure at room temperature,
3168 Pa. The molecular weight MWV of water is 18 g/mol, and R is the gas constant. T is
assumed to be the ambient temperature 300K, since simulations show that the liquid
temperature rises only slightly.
In the presence of a vertical thermal gradient in the z direction, the corresponding
density gradient can be found using the chain rule:∇CV =∂CV ∂CV ∂T
=
∂z
∂T ∂z

67

(3.10)

Typical values for the vertical thermal gradient ranges from 0.1-1 degrees/µm. Thus,taking the values given above and a vapor diffusion coefficient of D = 2.1x10-6 m2/s, therange of evaporation rates is 2 g/m2/s. The corresponding negative surface heat flux due
to evaporative cooling is -4858 W/m2. According to simulations, this value is 1 order ofmagnitude lower than what was is required to produce millimeter per second flow rates as
observed in experiments.
Computational fluid dynamics (CFD) simulations of the source sink model showthat a thermal dipole on a fluid surface can drive doublet flow through the Marangoni
effect. Simulations were conducted in Fluent 6.0 (Fluent Corp.) using a 3 dimensionalmodel of a water layer with dimensions 1 mm X 1 mm X 50 µm. No probe was includedin this simulation.

To form a doublet resulting from a thermal source/sink, a 2

dimensional heat flux profile was applied to the free surface of the water layer. This
profile consisted of a positive and negative Gaussian heat fluxes separated by a distanceof 20 µm. The magnitude of the negative heat flux was -105 W/m2, and the amplitude of
the source was required to be set 20% less than the sink in order to obtain a symmetricvelocity profile. Marangoni stresses are enabled on the free surface, and all remaining
model boundaries are given an isothermal, no slip condition.
The results are shown in Fig. 3.4. The applied heat flux profile is shown in Fig.
3.4a. Fig. 3.4b shows the velocity vectors, illustrating doublet flow occurring at the freesurface of the fluid layer. As predicted, flow is directed away from the hot point andtowards the cold point. The contours of x velocity (Fig. 3.4c) are given for comparison to
the theoretical model. Velocities approach 5 mm/s to the left of the sink, and reach avery high speed of 60 mm/s flow occurs between the source and sink. This phenomenon

68Figure 3.4: Simulation results of a doublet caused by a thermal dipole on the liquidsurface. (a) Contours of the heat flux supplied to the surface of a 50 µm thick layer ofwater. The cold spot is on the left, hot spot on the right. Separation is 20 µm. (b)Velocity vectors, showing 5 mm/s flow to the left of the sink. (c) Contours of velocity inthe +x direction

was not observed in experiments.
The 3 dimensional thermal simulation shown earlier in Chapter 2 (Fig. 2.5)
postulates how the interaction of the probe could result in doublet flow. Placing thecantilever close to the water surface results in an asymmetric heat flux supplied by theprobe to the liquid. The cantilever temperature is highest at the tip, and decays linearly
along its length; this pattern is reflected in the heat flux contours on the fluid surface. It
is thought that localized evaporation occurs near the cantilever tip, and the remainder ofthe cantilever heats the adjacent liquid surface. In this way, a sink may be formed at theleft end of the cantilever, while a source may be formed immediately to its right.
69

It is interesting to note that at room temperature (in ambient laboratory
conditions) doublet flows occur in water, but not in oils. This fact supports some of theevaporation theories outlined above. In oil or other non-volatile media, the localized
heating from the probe can create the hot point necessary for toroidal flows; however, thelack of evaporation precludes the fluidic sink required for doublet flow. By contrast, inwater, both hot and cold points can be realized, and therefore doublet flow can occur.

4. EXPERIMENTAL CHARACTERIZATION

Fig. 3.5 shows the doublet flow resulting from a thermal probe suspended above
the surface of a thin water layer. Deionized water was spread on a glass slide to thedesired depths, typically 50-100 µm.

Polystyrene beads (diameter 3 µm-10 µm,

Polysciences) were immersed in the water to serve as tracer particles. The time–sequence

Figure 3.5: High-speed doublet flow is illustrated in 4 sequential micrographs taken at
1/30 second intervals. Polystyrene beads are used to visualize the flow.

70micrographs, taken at 1/30 second intervals with a high speed CCD camera, show the
movement of the tracers in a high speed, symmetric doublet flow.

The maximum

horizontal velocity, measured just to the left of the probe tip, was found to be ~5 mm/s.
The streamlines and velocities are similar to the analytical model shown in Fig. 3.3,
which assumed the source and sink have a separation 2a = 10 µm and have a strength m =5x10-6. Based on this, the approximate dipole moment of the experimentally measured
doublet is about the same as the simulation, or 25x10-6. Streamlines are also similar tosimulations shown in Fig. 3.4.
In order to confirm that the doublet flow is in fact thermally driven, the flow androtational velocities were characterized as a function of input power (Fig. 3.6). The

Figure 3.6: Control of flow velocities. (a,b) Peak linear flow velocity as a function of (a)input power, and (b) air gap. (c) Rotation rate in the eddies, as a function of air gap. (d)Flow velocity vs air gap repeated for three different ambient liquid temperatures.
Experimental conditions are shown. The lines in (a) are a linear fit, and the lines in (b,c)
are a fit to 1/x2.

71

cantilever was held at a fixed angle and air gap above the liquid surface, and the input
power was ramped from 0-32 mW. Particle velocities scale approximately linearly,
increasing 90 µm/sec for every 1 mW applied. Since it is known that tip temperature
increases linearly with input power [Li03], these results indicate that the flow is
proportional to tip temperature. It is thought that increasing the probe temperature
proportionally increases the evaporation rate which drives the sink, as well as the local
heating driving the source. Marangoni flows scale linearly with temperature gradient. In
theory, doublet flow velocities scale linearly with the dipole moment, thus experiments
show that the dipole moment can be proportionally controlled through the input power.
Also shown is the dependence of flow velocities on the probe-liquid separation(Fig. 3.5b,c). Reduction of the air gap permits more efficient heat transfer, also resulting
in increased velocities. A probe was biased at a fixed input power and lowered at 10 µm
intervals until it came into contact with the liquid. Fig. 3.6 shows that with a 15 mW
input power, particle velocities of nearly 5000 µm/sec are achieved at air gaps of < 10µm, along with rotational velocities of 1200 rpm in the adjacent vortices. Particle
velocities decrease as 1/x2 with increasing air gap, indicating that heat transmission
through the gap is inversely proportional to the gap thickness. Both temperature control
and air gap provide a means to control doublet velocities.
The dependence of flow velocities on liquid temperature (Fig 3.6d) provides
further evidence supporting thermally driven flow. In this experiment, the glass slide
below the water sample was biased at 13, 27, and 41 °C using a circulating
heating/cooling plate.

At each temperature, particle velocities were measured as afunction of air gap while holding the probe at constant power and angle. Trends of faster72

velocities with smaller air gaps hold true as before, but it can also be seen that higher
liquid temperatures shift the entire trend upward. For example, at a ~10 µm air gap, theparticle velocity at 13 ºC is only 165 µm/sec, compared to nearly 900 µm/sec at 41 ºC.
Increased liquid temperature, therefore, enhances the speed of doublet flow. Overall,particle velocities in this experiment were slower than the results shown in Fig 3.5b due
to lower input powers and the fact that a thinner probe (R01) was used, both of which
reduce the surface heat flux.
An unusual feature of the doublet flow is that its orientation can be reversed. For
example, a probe (R02) suspended at a 15° angle with respect to the liquid plane resultsin doublet flow from left to right; however, when the probe angle is doubled to 30° (while
keeping all other parameters constant), the direction of flow is reversed, and the locationof the adjacent vortices shifts to the left as shown in Fig. 3.7. According this geometricalshift, it is believed that the fluidic sink does not move, but the location of the source
shifts from below the cantilever to a region beyond the edge of the probe. This would

Figure 3.7: Flow reversal. The direction of the flow can be reversed by changing theangle of the heater. For example, using probe R02 at a 15° tilt, 15 mW input power,
and a ~15 µm air gap, the doublet flows left to right, and the rotation in the vortices iscounter-clockwise (left). Increasing the angle to 30° while keeping all other parametersconstant reverses the direction of the flow and rotation and shifts the location of thevortices to the left of the cantilever (right).

73

effectively switch the orientation and cause the shift to the left. This theory is still
somewhat uncertain, but we can conclude, however, that the geometry of the heat source
plays a significant role in the orientation of the doublet pattern.
Complex flow patterns can be formed by forming arrays of doublets using
multiple thermal sources. In order to predict the theoretical flow pattern which would
arise from multiple doublets, the stream equations for each doublet may be added up by

Figure 3.8: Uniform flow generated with a linear array of doublets. (a) Theoreticalstreamlines of flow generated by an array of 8 doublets with 85 µm spacing obtained bysumming the respective stream functions. (b) Linear flow generation using an 8-probearray, numbered 1-8 from the top down. The array was placed ~15-20 µm above theliquid surface, held at a 15° tilt, and biased with a total power of 92 mW. Probes 1 and 4
were nonfunctional. Trajectories for 3 particles are marked with a square, triangle, andcircle on micrographs taken at 3 second intervals.

74

applying the principle of superposition. For example, the flow pattern generated by alinear array of 8 doublets with 85 µm spacing is shown in Fig. 3.8a. This particulargeometry was chosen to model the structure of the multiprobe array. The flow pattern,which resembles a uniform flow channel, was confirmed in experiments. An array of 8
thermal probes [Bas05A] was biased at 2.3V, dissipating 92 mW total power in six
probes (probes 1 and 4 were nonfunctional). The resulting flow pattern has a linear flow
region with adjacent rotational regions as predicted by simulations (Fig. 3.8b).
Deviations from uniform flow observed in several regions, such as the trajectorymarked with a triangle, can be attributed to the difference in air gap between the various
probes in the array in addition to the fact that two probes were not operational. The
noticeably smaller velocities (190 µm/sec) compared to single probes may be attributed
to the reduced temperatues of the heaters in the multiprobe array. These results illustratethat flow is highly dependent on the geometry of the heat transmitted to the liquidsurface. Therefore, it is possible to obtain custom flow patterns by arranging the heatsources in various configurations.
Subsurface particle flow, visualized by focusing the microscope at the bottom ofan 80 µm thick layer of water, differs significantly from the doublet flow patterns
observed at the surface. Particles flow radially inward over time, converging on a point
directly below the tip of the cantilever. Once at this point, the particles are accelerated
upwards towards the surface of the liquid layer (Fig. 3.9). The column of verticallydirected current is likely due to the fluidic source, which pulls in water below the surface,and outward and accelerates it outward on the surface as shown in Chapter 2. A similar
behavior was observed in the CFD simulations (data not shown); however, further

75

Figure 3.9: (a) Schematic of subsurface particle flow (80 µm below the surface).
Particles flow radially inward towards the area underneath the microheater tip. Uponreaching this point, they are immediately propelled upwards to the surface. (b)Sequential micrographs show three particles (marked respectively with a square,
triangle, and circle) converge towards the center and then disappear from the field ofview as they are propelled upwards.

modeling and experimentation is needed to clarify the mechanism driving the surface andsubsurface flow patterns observed.

5. SUMMARY

This chapter has demonstrated surface doublets, a unique flow pattern which
occurs only in films of water when driven by a thermal probe. The supporting theory
suggests that a doublet can be generated by a fluidic source and sink in close proximity.
The latter can be caused by localized evaporation, due to the sharp concentration gradient
between the probe tip and the liquid surface. The orientation of the source and sink is76

determined by the geometry and attack angle of the probe, suggesting that thetemperature gradient along the probe plays a significant role in generating doublet flow.

77CHAPTER 4:
A PROGRAMMABLE ARRAY FOR CONTACT-FREE MANIPULATION
OF FLOATING DROPLETS BY MODULATION OF SURFACETENSION

One of the fundamental limitations of present programmable microdroplet
actuation systems is that they rely on the droplet’s interactions with a solid surface. Suchan approach leads to surface adsorption resulting in device contamination and sample
loss. This chapter presents a contactless droplet manipulation system which relies onthermally generated Marangoni flows.

Programmable, two dimensional control ofmicrodroplets suspended in an oil film is achieved using a 128-pixel heater arraysuspended 100-500 µm above the oil layer. The heaters create surface temperature
perturbations, resulting in local Marangoni flows which can move droplets in either apush or pull mode. Programmed movement is achieved by the sequential activation of
the heaters, with digital control circuitry and a graphical interface providing addressable
control of each heater. Droplets with diameters 300-1000 µm can be manipulated andmerged at speeds up to 140 µm/s. Several system level issues are discussed: surface
temperature elevation can be reduced from 25°C to <2.5°C by using fluids with low
thermal conductivity; thermal crosstalk and thermal time constants can be improved by
20% and 80%, respectively, by using a heat sink; evaporation rates can be reduced byalmost two orders of magnitude by using a two layer oil medium; and the choice of an78

appropriate carrier fluid can achieve fluid velocities over 17,000 µm/s and reduces power
consumption to 30 mW/heater at moderate flow velocities. Microfabrication provides
added opportunities for power reduction and efficiency due to the favorable scaling of
Marangoni flows. The system provides a contactless platform for parallel droplet-based
assays.
1. INTRODUCTION

Digital microfluidic systems use microdroplets in an immiscible phase toencapsulate reagents and to serve as reaction containers. Precise, user-defined chemical
reactions may be achieved by transporting and merging droplets containing theappropriate samples and reagents [Son03A]. Compared to the traditional microfluidic
systems where samples are flowed through microchannels, digital microfluidics provides
an elegant approach to high throughput assays, offering inherent encapsulation, low
reagent consumption, and fast reaction times.
Programmable fluidic processors (PFPs) refer to systems which can dynamicallycontrol the movement of droplets [Gas04, Sri04]. Droplets are manipulated in real time
on a 2-dimensional space using methods such as electrowetting-on-dielectric (EWOD)[Cho03], optoelectrowetting [Chi03], dielectrophoresis (DEP) [Gas04], and magnetic
fields [Rid03]. As described in Chapter 2, all of these approaches, require a substratepatterned with electrodes or coils, and the increased cost may not be suitable for adisposable device.
A more important concern is that these approaches allow contact between thedroplet and the substrate. Any degree of contact or wetting between a liquid sample andthe substrate can result in surface adsorption. Proteins and other biomolecules readily79adsorb to hydrophobic surfaces like Teflon and PDMS as a result of hydrophobic
interactions [Yoo03, Sia03, Son03A]. In the traditional continuous flow devices, theadsorption of proteins and cellular debris leads not only to contamination, but also causeschannel blockages [McC03]. In general, surface adsorption raises concerns for device
contamination, sample loss, and in most cases, makes device reuse impossible.
The problem of surface adsorption remains a concern with existing droplet
manipulation technologies because many of the current techniques rely on surface
interaction with the droplet. For example, EWOD applies voltages to a two-dimensional
grid of Teflon-coated electrodes to dynamically control surface energies. Due to its highhydrophobicity, Teflon is particularly susceptible to adsorption. It has been suggested
that if silicone oil is used as the encapsulating medium, the droplet may be separated
from the Teflon surface by a thin film of oil [Sri04]; however, the effectiveness of thetechnique depends significantly on the interfacial tension between the oil and the protein
concentration in the droplet. Protein adsorption can also render hydrophobic surfaces
hydrophilic, which interferes with EWOD and other surface based actuation techniques[Sri04, Yoo03].
The best way to avoid surface adsorption is to keep the droplets away from any
walls or the solid substrate; however, there are presently no droplet manipulation
techniques which can avoid all surface contact. This chapter discusses a contactless,programmable system for actuating droplets in which suspended droplets are manipulatedusing Marangoni flows. Chapter 2 described the use of Marangoni flows of various
geometries for droplet mixing and control [Bas05B, Bas05C, Bas07A, Bas07B, Bas08A];
however, these flows were generated using fixed heat source geometries and were not80Figure 4.1: A complete system for programmable, non-contact droplet actuation basedon Marangoni flows, including a 128-pixel array of resistive heaters suspended above
the oil layer, control circuitry, and a graphical user interface.

programmable. If a programmable system is desired, dynamic control of the heat flux isneeded. This chapter discusses a way to trap and manipulate droplets using a twodimensional grid of heaters suspended above a fluid layer (Fig. 4.1). Programmed two
dimensional control of Marangoni flows and droplet movement is achieved through thesequential activation of individual heaters.
The chapter begins with a theoretical and simulation model of the push and pullmode of actuation in section 2. Section 3 gives a brief discussion of system level design
and issues. Experimental results are presented in section 4, and a critical assessment of
the approach is given in section 5. Section 6 gives conclusions.

81

2. THEORETICAL

As noted earlier, local Marangoni flows can be initiated on the free surface of aliquid layer by placing a millimeter-scale heat source above the surface and in close
proximity to it (i.e. typically < 1 mm away). Heat transfer through the air gap increases
the surface temperature of liquid directly beneath the heat source, and creates a radial
temperature gradient.

In most liquids, the surface tension is inversely related totemperature, thus the temperature gradient creates an inverse gradient in surface tension.
The resulting shear stress boundary condition is the same as described in Chapter 2. It isrepeated here for convenience [Bas07B, Hig00]:rdu S
τ s = µ r = −σ T ∇TS (4.1)
dN

where µ is the liquid viscosity, σ T is the surface tension temperature coefficient, ∇TS isrr
the surface temperature gradient, u S is the tangential surface velocity, and is N is thersurface normal vector. The resulting surface Marangoni flow u S is directed away fromthe heat source, and it is accompanied by subsurface flows oriented in the opposite
direction.
With ‘static’ heat sources it is difficult to achieve linear movement of droplets
unless either 1) the heat source is scanned laterally (which requires an XY scanningstage), or 2) a tapered heat source geometry is used. More importantly, with static heatsources it is not practical to actuate multiple droplets simultaneously.
This chapter discusses a versatile approach which utilizes a 2 dimensional array ofheaters to achieve dynamically-controlled movement.

Each heater, when activated,creates a local temperature gradient on the liquid surface which generates surface and82subsurface Marangoni flows (see simulation, Fig. 4.2). The heater can either push adroplet away with its surface flow (push mode actuation), or pull a droplet toward it via
its subsurface flows (pull mode actuation) depending on the size of the droplet and thedepth of the flow region. Droplet movement can therefore be programmably controlled
through the sequential activation of individual heaters.
Push and Pull Mode Actuation. Droplets can be actuated in either a push or pullmode.

The mechanisms of both are shown using a computational fluid dynamics

simulation (FLUENT 6.0, Fluent Corp). The software uses an iterative procedure tocompute the coupled thermal-fluid problem.

In each iteration, it solves the energy

equation, equates the surface temperature gradient to a shear stress using Eq 4.1, and thencalculates the flow in the liquid layer using the continuity and Navier Stokes equations.
The process repeats until all sets of equations converge.
Fig. 4.2 shows the temperature contours and flow vectors generated by a resistive
heater held 100 µm above a layer of mineral oil. The heater consists of a 800 µm-wide
surface mount resistor mounted on a printed circuit board (PCB).

The problem ismodeled in a two dimensional axisymmetric geometry. A heat generation boundary
condition is applied to the surface of the chip in order to tune the temperature of the heatsource to the desired temperature. The thermal conductivity of the alumina chip and PCB
are 27.6 and 0.3 W/m-K, respectively, and the liquid is assumed to be DC-550 siliconeoil (Dow Corning, Midland MI) with the properties listed in Table 4.1. In the example
shown in Fig. 4.2a, the chip temperature increase is 100 °C, the liquid temperature
increase is 24 °C. The outward temperature gradient results in a flow velocity of 1.6
mm/s.

83

Figure 4.2: Results from a computational fluid dynamics simulation (FLUENT 6.0). (a)Surface temperature contours generated by an active heater and velocity vectors of thesurface and sub-surface Marangoni flows. (b) Flow velocity vs. peak surface temperaturechange for 100 µm, 200 µm, and 500 µm gap between the heater and liquid. CR
represents the coupling ratio, which is defined as the ∆T on the liquid surface divided bythe ∆T in the heater.

Simulations over a range of heat input conditions (Fig. 4.2b) demonstrate that theflow velocity is proportional to the temperature gradient imposed on the liquid surface(which, in turn, is proportional to the heater temperature). Also, to maximize the thermal
coupling requires that the heater be placed as close to the surface as possible. Due to the
low thermal conductivity of air, the thermal coupling between the heater and the liquid is84

strongly dependent on the separation gap. For example, at a 100 µm separation, thetemperature increase at the liquid surface (i.e. the coupling ratio) is 23% of the increase

Figure 4.3: 3-D CFD simulation of push and pull mode actuation on a Ф=200µm and
Ф=800µm droplet, respectively. The droplet volumes were meshed as an immiscible
spherical volume within the fluid layer. (a) Flow vectors showing pressure and viscous
forces on a 200 µm droplet offset 1 mm from the center of the heat source. (b) Moment
force on an 800 µm droplet offset 500 µm from the center of the heat source. (c) Atrapped 800 µm droplet after it has been pulled into the center of the heat source.

85

in the heat source. At a 500 µm gap, the coupling ratio falls to 10%. A small gap is also
important in maintaining a sharp lateral temperature gradient, which translates directly
into flow velocity. In this regard, the approach of having suspended heaters benefits fromthe low thermal conductivity of air. Were the heaters embedded in the liquid, therelatively high thermal conductivity would preclude the formation of sharp gradients,
limiting the velocity of Marangoni flow. Furthermore, it would cause undesirable heatingin the bulk fluid.
The interaction of droplets with the flow is shown in Fig. 4.3. This set ofsimulations includes a 3-dimensional fluid layer with an embedded spherical volume torepresent the immiscible droplet. A surface heat flux of 50 mW/mm2 is added to a 1 mm
square region in the fluid layer to model the local heating. Assuming the properties of
DC-550 fluid, this results in a recirculating flow (maximum surface flow velocity of 6mm/s) which applies pressure and viscous forces to a droplet. The lateral pressure andviscous forces on the droplet were calculated by integrating the respective forces along
the surface area of the droplet, and moment forces were integrated in a similar mannerusing the droplet centroid as the moment axis.
Qualitative results (Fig. 4.3a) demonstrate the operation of the push and pullmodes. A droplet < 200 µm in diameter gets pushed away from the active heater by
surface flows (push mode). In this case, the center of mass is near the fluid surface,which is dominated by outward-directed surface Marangoni flows. A combination ofpressure and viscous forces (Fig. 4.3a) push the droplet outward. In contrast, a larger
droplet (for example, Ф=800 µm) tends to get pulled into the active heater. In this case,86the droplet’s center of mass is deeper below the surface, where the inward-directedsubsurface flows are more significant.
It is also interesting to note that the opposing surface flows and subsurface flow
create a moment force on the droplet, which causes the droplet to rotate as observed inexperiments (Fig. 4.3b). It is believed that the spinning motion along with the buoyant
force helps to ‘roll’ the droplet towards the center. Once at the center, the droplet isstabilized by the balanced forces on either end of the droplet (Fig. 4.3b). A quantitative
comparison of the moment and lateral forces on a large (Ф=800 µm) and small (Ф=200

Figure 4.4: Simulated results. Forces acting on a Ф=800 µm and Ф=200 µm droplet,taken from the simulation in Fig. 4.3. (a) Moment force on the two sizes of droplets at
various lateral offset distances from the center of the heat source. (b) Lateral pressure
force (directed away from the heat source) for the two droplets, also at various distancesfrom the heat source.

87µm) droplet is shown in Fig. 4.4. The large droplet clearly experiences a large moment
force at a distance of 500 µm from the center, while the small droplet experiences
virtually no moment force. With regards to pressure forces, the small droplet experiencesa small force directed away from the heat source.

The large droplet, by contrast,

experiences a larger force (up to 0.6 µN) in the reverse direction.
Choice of fluid. Several aspects must be considered when choosing anappropriate carrier fluid in which to create the Marangoni flows. First, the fluid must behydrophobic so that the water droplets within it are immiscible, and biocompatible toallow for biomolecular reagents. Second, the fluid should have a higher density thanwater, which ensures that the droplets float on top of the oil layer and make no contact
with the glass substrate below. Third, the liquid should be of low volatility to prevent
undesired evaporation.
Most importantly, the oil should be chosen to maximize coupling between flow
speed and applied heat.

To represent this criteria, a figure of merit may be used.

Equation 1 implies that, under a given temperature gradient, the Marangoni flow velocity
is proportional to σT/µ.

The gradient itself is inversely proportional to the thermal

conductivity κ. Therefore, the figure of merit for a given fluid is
FOM = −

σT
(4.2)
µκ

This figure of merit gives an indication of the Marangoni flow velocity in various
liquids under identical heating conditions. Temperature coefficients of surface tension
are seldom provided for most chemicals, but they can be estimated using the Eötvös law

σ T = k γ Vm 2 / 3 , where Vm is the molar volume of the liquid and k γ = 2.1x10-7 J/K for88

virtually all liquids [Pil51, Eöt86]. They can also be experimentally measured using the
DeNouy ring method [Nou19] or drop shape analysis [Son96]. Over the range of carrier
fluids examined in this work, the surface tension coefficients do not vary by more than 25X.
Thermal conductivity data for fluids is typically available. Aqueous films, forexample, have relatively high thermal conductance (0.6 W/m-K) which limits theformation of sharp surface temperature gradients.

In contrast, typical mineral andsilicone oils have conductivity only 20% that of water, and also have fairly low vapor
pressures to reduce evaporative effects. Fluorinated organic liquids function as suitable
carrier fluids for Marangoni flows, due primarily to their low thermal conductivity on theorder of 0.06 W/m-K; however, their evaporation rates are somewhat higher than mineraloils.
Given the diverse set of requirements, three oils are chosen. The first is mineraloil (USP, Rite Aid Pharmacy), a biocompatible, transparent oil often used in biochemical
assays for reagent encapsulation (for example, to encapsulate embryos, and highthroughput assays).

This oil is less dense than water, so it is used primarily forcharacterization and for particle experiments. The second group of fluids includes highdensity silicone oils which allow the droplets to float on the surface. These include DC550 and DC-704 fluids (Dow Corning). The last fluid is FluorinertTM (FC-3283, 3M
Corp.), a fully fluorinated dielectric fluid which has low very thermal conductivity, low
miscibility to water, and high density. FC-3283 has often been used as a carrier fluid in
microdroplet systems [Son03A]. Material properties for each of these fluids are given in
the Table 4.1.

89

Parameter

DensitySurfacetensioncoefficient
ThermalConductivity
Viscosity
Figure of
Merit
References

Symbol Units

MineralOil USP

Liquid
DC704
DC550
Silicone Siliconeoil
oil

FC-3283
dielectricliquid

ρ
σT

kg/m3
mN/mK

886
-0.2201070-0.069**1070-0.036 *1820-0.410 *

κ

W/m-K

0.12

0.14630.16 **

0.066µ|σT/κµ|kg/m-s0.026
7.1x10-2

0.134
3.5x10-3

0.042
5.3x10-3

0.0014
4.44[Sam99A,
Ber03][DC98A,
Van97][DC98B, [3M01]
Ber03]

Table 4.1: Material properties for 3 liquids used in generating Marangoni flows. Values
marked with a * are calculated using the Eötvös law, and those marked with ** areestimated from similar fluids.

90

3. SYSTEM DESIGN AND EXPERIMENTAL SETUP

The 16x8 heater array used to initiate Marangoni flow consists of #0603 surfacemount resistors (1x0.8x0.3 mm) placed at 1.9 mm pitch on a two sided printed circuitboard (PCB) (Fig. 4.5). The 100 Ω resistors are electrically connected via thru-holes tothe opposite side of the PCB which provides routing, cable connectors, and a heat sink
(Fig. 4.6). This two sided design allows the resistors to be placed near the liquid without
obstruction. Commercial foundries are used to manufacture PCBs (Sunstone Circuits,
Mulino OR) and to assemble the resistors in a solder reflow process (Screaming Circuits,
Canby OR).

Figure 4.5: Micrograph of heater array91

Figure 4.6: Experimental setup, showing the heater array above a glass slide on which
the liquid samples are placed.

A separate PCB houses the addressing logic and driver circuitry, with electricalinterconnect provided by two 64 pin ribbon cables. A bank of power DMOS transistors,
one for reach resistor, can provide a maximum of 250 mA current, or 6.25 W power, toeach heater. The range of power actually used is much smaller, typically <1.3 W. The
heater power is set globally for all the resistors by adjusting the voltage VR, with typicalvoltages ranging from 8-12V.
Heaters are individually set and reset via a graphical interface and control
circuitry (Fig. 4.7). D-latches are used to maintain the on/off state of each heater. A
PCMCIA digital I/O card (NI-6062E, National Instruments) connected to a laptop
computer can toggle the state of each heater using a 4 line serial protocol. The shift
register clock signal synchronizes the loading of a command sent via serial input line into
the shift register. During the first 8 clock cycles, the shift register is loaded with 7 bits
indicating the address of the resistor, and 1 bit signifying an on or off state. Once thecommand register is loaded, the latching signal is pulsed low to commit the state of theheater. Therefore, each set/reset command takes < 10 cycles. With a 1 MHz clock
signal, the refresh rate is 105 heaters/second; therefore, a 128 pixel array can be set in <592ms. The asynchronous reset line, when pulsed low, resets all the heaters in the array toan off state.
A user interface, written using Labview software (National Instruments, Austin
TX), allows the user to graphically toggle individual heaters in the array, and also
provides a batch-mode interface in which commands can be read from a text file.
Fig. 4.6 shows the experimental setup. The carrier oil is loaded in a reservoir with

(a)

(b)

Figure 4.7: (a) Schematic of logic and driver electronics. There are 128 joule heaters,
and one D-latch and driver for each (these elements are represented by the <128>). The
remaining components are shared. The forward slash indicates a multi-line bus, and thenumber beneath indicates the number of lines on the bus. (b) Timing diagram, showing
the serial input scheme for toggling heaters on and off.

93

a transparent bottom so that droplet motion can be imaged from below with a CCD
camera. The reservoir is placed on a glass platform which is actively cooled with acirculating refrigerated water bath (Neslab Endocal). The purpose of the water bath is toprevent heating of the bulk fluid which can reduce the surface temperature gradientsneeded for Marangoni flow and also can cause loss of function or other damage tothermally-sensitive samples such as enzymes and other biomolecules. Droplet samples
are deposited directly into the oil using a micropipette. The heater array, with the chip
resistors facing the oil sample, is then lowered to within 100 µm above the liquid surface
using a micromanipulator. Parallel alignment and leveling of the glass platform and theheater array board must be done prior to the experiment to help ensure that heater-liquid
separation is uniform through the entire array. (A bubble alignment tool is useful for thispurpose.)

4. EXPERIMENTAL RESULTS
Test Setup and Characterization. Individual heaters were first characterized forthermal efficiency by using a fine gauge thermocouple (CHAL-0005, Omega
Engineering) to measure the temperature as a function of input power. The typicalthermal isolation of each heater is ≈120 K/W, and a maximum temperature of 175°C(Fig. 4.8a) can be achieved without burnout. The parasitic temperature on an adjacent94

Figure 4.8: Experimental results. (a) Temperature of an active heater (TH) vs. input
power. Also shown is the temperature increase one pixel away (T1), two pixels away
(T2), and on the substrate 2 cm away (TS). (b) Flow velocity (25 µm pollen) anddroplet velocity (Ф=300 µm droplet) vs. input power and heater temperature. This
experiment used Dow Corning 550 silicone oil and a heater-liquid gap of ~100 µm. (c)Comparison of maximum flow velocities obtained with 4 fluids including mineral oil,
Dow Corning 550 and 704 silicone oils, and Fluorinert FC-3283 dielectric liquid.
Calculated figures of merit for each fluid are given in the figure.

95

heater 1.9 mm away is 80°C, roughly 38% of the increase on the first heater. On a heatertwo pixels away, the parasitic increase is 30%. The bulk substrate remains close to room
temperature. The thermal crosstalk can be improved by 10-20% by adding attaching apassive fin-type heat sink to the opposite side of the PCB. The presence of the heat sinkreduces lateral heat conduction by maintaining an isothermal base opposite the heaters.
The consequence is that it reduces the temperature of the active heater by 15-30%.
The thermal time constant of the heater was measured by switching the heater onor off and monitoring its real-time temperature with the microthermocouple connected toa data acquisition card (NI-6062E, National Instruments). The thermal mass and time
constant of the microthermocouple (0.05 s) is much smaller than the heaters and therefore
does not impact the measurement. Without a heat sink, the probe temperature can beswitched between room temperature and 175°C with 1.13 W applied to the heater. The
10-90% heating time constant is 41 s, and the cooling time constant is 83 s. The 2x
difference between the heating and cooling times is due primarily to the lack of an
efficient cooling mechanism. Adding the passive fin-type heat sink provides remarkable
improvement in both thermal time constants – the heating time constant is reduced 80%
to 6.8 s, and the cooling time constant is reduced 95% to 5.6 s. In most cases, the speed
improvement is well worth the reduction in temperature.
Bulk fluid temperatures are kept in check by the circulating water bath. For
example, if a 1.3 W heater is placed 200 µm above the liquid surface, it eventually brings
the liquid temperature to > 200°C if the liquid is not actively cooled. By contrast, withthe cold water bath set to 10°C, the liquid temperature can be maintained under 37°C. In

96

practice, the bath temperatures were set to 15-20°C because the increased liquid viscosity
at low temperatures results in slower Marangoni flow velocities.
Surface flow velocities were measured by tracking the movement of particles invideo clips with frame rates of 30 f/s. Surface flow velocities up to 1700 µm/s can beachieved in DC-550 silicone oil and in mineral oil using 1.3W power and using 25 µm
pollen particles as flow tracers (Fig. 4.8b). As predicted from simulations, the flow
velocity is proportional to the power supplied by the heater. Simulations also predict thatthe surface temperature change for achieving 1700 µm/s flow velocity is 24 °C (assuming
a 100 µm gap), while the experimentally measured temperature change is between 20-30°C. Thus, the simulations and experiments show good agreement. The flow velocity ofdroplets is small compared to pollen due to their larger mass and drag (Fig. 4.8b). A
Ф=300 µm droplet, for example, moves at speeds up to 73 µm/s in the push-mode.
Selecting the Fluid Medium. In order to obtain faster flow velocities and lower

temperature perturbation, alternative fluids can be used (Fig. 4.8c). One alternative is
Dow Corning 704 fluid, a high density silicone oil with lower viscosity than DC-550,
which helps it attain 2X greater flow velocity than the DC-550 fluid. As mentioned
earlier, fluorinated liquids such as FluorinertTM have properties well suited for Marangoni
flow generation. Within this family of liquids, FC-3283 is chosen for its low thermal
conductivity and low viscosity. The maximum flow velocity measured with FC-3283 is
17 mm/s, approximately 10x greater than mineral oil and DC-550 fluid at the same power
level. Moreover, moderate flow velocities (2.4 mm/s) can be achieved with only 29 mW
of input power to the heater, only 1/40th of the power required to achieve the same
velocity in DC-550. Thus, FC-3283 is an appropriate carrier fluid for obtaining flows

97with low power and low temperature elevation to the fluid. The consequence is its higher
evaporation rate compared to the silicone oils.
Another challenge with using FC-3283 is the instability of droplets within thehydrophobic fluid. Aqueous droplets deposited at the center of the fluid reservoir tend tomove to the edges of the reservoir where they eventually attach to the reservoir wall. The
stabilization problem is solved by adding the fluorous surfactant 1H,1H,2H,2H-perfluoro1-octanol (PFO, Sigma-Aldrich) to the FC-3283 carrier fluid in a 1:10 v/v ratio. The
surfactant molecules, which are soluble only in the fluorous phase, assemble at aqueousfluorous interface and stabilize the droplet [Roa05]. No droplet instability is observed
after adding the surfactant.
Push and Pull Mode of Actuation of Droplets. Droplets immersed in the carrier

fluid can be actuated in either the push or pull mode. The push-mode of actuation occurs
in single layers of DC-550 fluid when the center of gravity of the droplet is near thesurface. This can be ensured in one of two ways: 1) by pipetting the droplets above thesurface of the liquid so that the droplet floats on top of the surface, or 2) by using small
droplets (Ф<200 µm). In this mode, surface Marangoni flows drive the droplet awayfrom the active heaters (Fig. 4.9). Multi-heater configurations may be used to direct adroplet in the desired direction. For example, two adjacent heaters activated next to a
droplet push the droplet in a straight line, while a right-angle turn can be accomplishedusing three heaters in an L-shape. Arbitrary movements at speeds up to 200 µm/s can begenerated with sequential activation of such configurations.

98

Figure 4.9: Push-mode actuation. (a) Surface Marangoni flows create a droplet force(FD) oriented away from the active heater. (b-e) A Ф=900 µm floating droplet is moved
along a square path by activating multi-heater configurations sequentially. Active heaters
are shaded. PH=1 W/heater, gap≈400 µm, and the fluid is DC-550 silicone oil.

In the pull mode of actuation, droplets are pulled toward the active heater by thesubsurface flows. To obtain the pull-mode, it is important that the center of gravity of thedroplet is several hundred microns below the surface. To do this, 1) the droplet must be
dispensed while the pipette tip is submerged beneath the carrier fluid to ensure the droplet
is not floating above the carrier, and 2) the droplet diameter must be larger than 500 µm.
Experimental results demonstrate that droplets can be transported at speeds up to 140µm/s in the pull mode. Compared to the push mode, this mode offers a more scalable
control because only activated pixel is necessary to trap a droplet.

99

The sequential

Figure 4.10: Pull-mode actuation and droplet merging. (a) Subsurface Marangoni flows
create a force on the droplet (FD) toward the active pixel. (b-e) Droplet merging withpull-mode actuation. Two droplets (Ф=600 µm) are merged through sequential activationof the heaters. Active heaters are shaded. PH=1 W/heater, gap≈300 µm, and the fluid isDC-550 silicone oil.

activation of adjacent pixels can translate the droplet along a virtual 2-dimensional grid.
As a consequence, the pull mode enables the simultaneous actuation and merging ofmultiple droplets (Fig. 4.10). Droplet merging, as indicated earlier, is one of the essentialfunctions for droplet-based assays. In this platform, typical droplet volumes are on theorder of 100’s of nL.
Due to elevated temperatures, droplet evaporation can present a challenge. For
example, 1 mm droplets floating on top of the oil layer tend to evaporate in <2 min. To
address this issue, two miscible oils were combined, one with density less than water(mineral oil), and the other with density greater than water (DC-550 Fluid). In the two100

Figure 4.11: Preventing droplet evaporation. Measurements showing variation ofdroplet size over time (log scale) for a Ф=650 µm droplet in single and double layer oilsystem. The single layer oil system consists of DC-550 silicone oil, and two layer
system consists of DC-550 and mineral oil.

layer system, aqueous droplets remain suspended between the two layers, unexposed tothe both air and the glass surface below. The suspended droplets are manipulated using
subsurface flows (pull mode actuation). In the multilayer oil system, evaporation times
are on the order of hours, 100x higher than the single layer system where the droplet is
exposed (Fig. 4.11), allowing for assays which require longer incubation times. An
added benefit is that it also reduces the overall temperature elevation in the droplet, since
the majority of the temperature perturbation occurs at the liquid surface. The depth ofeach of the fluid layer plays an important role in the two layer system. In order toachieve pull mode actuation in a two layer system, two conditions must be satisfied: 1)
the diameter of the droplet should be between 500 and 1000 µm, and 2) the thickness ofthe mineral oil layer should be > ½ the thickness of the DC-550 layer. If either of thesetwo conditions is not satisfied, the droplet will be moved in the ‘push’ mode or no
actuation will occur at all.

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5. DISCUSSION

The design issues with Marangoni flow-based droplet manipulation include 1)
coupling efficiency (maintaining fast droplet flow velocities while minimizing thetemperature perturbation and power consumption), and 2) scaling to small length scales.
Efficiency. The efficiency of the Marangoni technique depends on the systemproviding a sharp temperature gradient at the fluid interface, and then translating that
gradient into a high speed flow. To do this, one must first choose a liquid with a highfigure of merit, as demonstrated in Fig. 4.8c.

Fluorinated carrier fluids, with theirrelatively high surface tension coefficient and low thermal conductivity, make them agood carrier fluid for Marangoni flows, giving 10X higher velocities at the same power,and 1/40th the power consumption at the same velocity; however, one must be careful touse appropriate surfactants to stabilize the droplets. Furthermore, they are immiscible tomany oils, which makes it difficult to create multilayer oil systems for evaporation
reduction.
Efficiency can also be improved by placing the heat sources as close to thesurface as possible. This not only increases the coupling ratio (∆TSurface/∆THeater), but it
also increases the lateral temperature gradient necessary for producing flow. With anarray of heaters, the challenge is to keep the heater-liquid separation small and equal forall of the heaters in the array. The present approach can obtain gaps as low as 100-200µm; but this can be improved by using an optical feedback system or a more precise
leveling system.
Finally, one can increase the efficiency of the heater itself. Microfabricateddevices with thermally insulative materials and small cross sections provide high102efficiency and fast time constants.

For example, a polyimide cantilever with an

integrated heater can achieve 100 °C temperature while dissipating only 10 mW ofapplied power [Li03]. Such heaters would reduce power consumption by up to 2 ordersof magnitude, which is important especially if the number and density of the heaters in
the array is scaled up.
In order to allow localized control, thermal crosstalk between heaters is a concern.
Present experiments show a crosstalk ratio of 35% between adjacent pixels (Fig. 4.8) due
to parasitic heat flow through the PCB board. As shown earlier, a 10-20% improvement
can be obtained by placing a heat sink on the backside of the array.

Additional

improvements can be made by a number of means, such as using a thinner PCB board,
removing portions of the board to decrease conduction, or by placing a thermallyinsulative barrier between the heaters and the PCB (while maintaining electricalconductivity).
An alternative is to use a lithographic process to batch fabricate high density
arrays. Thin film devices with small cross sections would improve the thermal isolation
between heaters and reduce power consumption. Integrated addressing electronics, suchas those found in commercial active pixel bolometers [Col98], could also be leveraged toprovide electronic control of large arrays.

However, one of the challenges of a

microfabricated array is placing the heaters on relief structures in order to facilitate local
heat transfer to the liquid surface. An alignment process to ensure an equal gap between
the heaters and the liquid surface is especially important for all the elements in the array.
Scaling Study. In general, as a surface dependent phenomena, the Marangoni

effect scales favorably to small length scales when compared to body-force driven

103

mechanisms. Therefore, the possibility of downscaling this technique merits a theoretical
study. To do this, simulation models spanning a large range of length scales were created
and analyzed for trends. Both the size of the heater and the gap between the heater andliquid are varied over two orders of magnitude: the heater radius is scaled from 1 mm to10 µm, and gap is correspondingly scaled from 500 µm down to 5 µm, while keeping a
constant ratio between the radius and gap. The liquid depth remains constant in order toavoid the increased viscous effects in thin layers. In all of the simulations, the heater
power is tuned in order to get a liquid temperature change of 10 K. This is done tocompare the effects of downscaling.

Fig. 4.12a shows an important result: thetemperature gradient increases at smaller length scales. Eq. 4.1 suggests that this should
result in faster flow velocities however, it is also necessary to consider the increasing
viscous forces when scaling down.

Fig. 4.12b shows that the flow reversal depth

becomes smaller at the smaller length scales.

In other words, the cross-sectional

thickness of the flow region decreases with the size of the heat source. This increases theviscous forces between the flow layers, resulting in smaller surface velocities. As aresult, the Marangoni flow velocities begin to fall at length scales below 100 µm. As
such, it is concluded that 100 µm heaters are a suitable size scale for maximum
efficiency. It should also be noted that the range of droplets which can be trapped
depends on the flow reversal depth. At the present length scale (2 mm), droplets withdiameter 400-1000 µm (30-500 nL) can be efficiently actuated in the pull mode. At a
100 µm length scale, with a flow reversal depth is 80 µm, it is estimated that 80-100 µmdiameter (~200-500 pL) can be efficiently actuated in the pull mode. Overall, scaling to104

smaller dimensions results in 1) decreased power consumption, 2) increased velocity (aslong as the length scale is > 100 µm), and 3) the ability to manipulate smaller droplets.
Miniaturization and scaling to large arrays is not without challenges.

For

example, miniaturization may offer lower power consumption per heater, but the larger
number of heaters in a high density device would increase the overall system power
consumption. Thermal crosstalk between heaters must also be considered when placing
heaters at a smaller pitch. Issues such as these will require the careful design of a highFigure 4.12: Scaling study (simulation). (a) The surface temperature gradient andcorresponding shear stress is plotted at various length scales. In all cases, the absolutetemperature change on the liquid surface (∆TS) is 10°C. (b) Flow velocity (bluediamond) and flow reversal depth (red square) plotted for each length scale, under thesame condition of ∆TS= 10°C.

105density array and appropriate heat sinking in order to deliver efficient, isolated
temperature perturbations on the liquid surface.

6. SUMMARY

This chapter explores how Marangoni flows can be deliberately controlled bycreating dynamic temperature profiles on the liquid surface.

A contactless,programmable droplet manipulation system which utilizes the Marangoni effect is
described. The distinguishing feature of the approach is that the droplets are suspended
can be controlled without contact with solid surfaces, thus preventing contamination.
Furthermore, there is no complexity in the substrate. Programmable manipulation andmerging of multiple droplets was demonstrated using a system with 128 heaters and asoftware controlled interface. One of the challenges of the technique, particularly forbiomedical assays, is the temperature change required in the liquid. Initial experiments
using common silicone oils have shown a 20-30K elevation. However, it was shown thatthe temperature change and power consumption can be reduced by a factor of 40 by using
a fluid such as Fluorinert which has a high figure of merit. Scaling to smaller sizes does
not increase flow speeds; however, it does reduce power consumption, and allows digital
control of smaller droplets.

The future direction of this work is to develop a

microfabricated heater array which will achieve these performance improvements, andalso allow high throughput manipulation of a larger number of droplets.

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CHAPTER 5:
CONCLUSIONSThis thesis has explored the use of the Marangoni effect for fluidic actuation at
small length scales. By placing small heat sources < 1 mm above a thin liquid layer,
sharp temperature gradients can be generated at the fluid surface. Due to the inverse
relation between surface tension and temperature, shear stresses are generated at thesurface, inducing local flow which travels away from the heat source on the surface, andin the opposite direction below the surface. At submillimeter length scales, it is possible
to efficiently generate flow due to the sharp temperature gradients and the strong viscous
coupling at low Reynold’s numbers. With regards to microfluidic systems, the advantageof this approach is that flow can be generated without contact to the liquid sample(avoiding contamination), and without any components in the fluidic substrate (reducingcost).
By engineering the shape of the heat source, it is possible to generate unique
Marangoni flow patterns which can manipulate microdroplets suspended in an oil layer.
As discussed in Chapter 2, the point, linear, annular, and tapered geometries generate
flows emulating (respectively) droplet collectors, channels, traps, and pumps.

Theadvantage of these virtual components is that they have no physical structures, and canaccomplish their function entirely by virtue of the interaction of the flows with the
droplets. Many of these flows have a size selectivity as well, allowing for the possibility107

of droplet sorting. The simulation model described in this thesis illustrates each of theseflows and gives an understanding of the mechanism of operation.
The doublet pattern (described in chapter 3) is another type of surface flow whichis achieved by placing a thermal probe near a layer of water. This type of flow achieves
5 mm/s linear velocity and 1300 rpm rotational velocity, making it useful as an in-plane
mixer.

It is notable that doublet flow occurs in water, a liquid of high thermal

conductivity, but this flow pattern cannot be achieved in oil. The toroidal flows, on theother hand, occur in oil but not in water. Doublet flow is consistent with a thermal dipole
on the fluid surface, and the directionality of the temperature gradient across the probe
appears to play a major role in this type of flow pattern.
Programmable actuation of droplets using Marangoni flows can be achieved withdynamic heat fluxes rather than static heat fluxes. Chapter 4 discusses a two-dimensional
actuation system which consists of an array of heaters suspended above the surface. The
system can push and pull droplets (depending on their size) from place to place throughthe sequential activation of heaters, rather than by scanning the heaters themselves. The
pull mode proves to be more useful than the push mode because only one active heater isneeded per droplet. Using the pull mode, the simultaneous control and merging of two
400 nL droplets is demonstrated at speeds up to 200 µm/s. Power consumption required
for flow generation can be as little as 30 mW/heater if a low thermal conductivity fluid
such as Fluorinert is used, and up to 1 W/heater for other fluids such as mineral oil.
Thermal crosstalk is 35% in the present implementation, which uses surface mountresistors on a printed circuit board at a 2 mm pitch. Both power consumption and108crosstalk can be greatly improved by using microfabrication to make thermally isolated
heat sources which consume less power.
In general, the efficiency of this technique relies on having a thermally efficientheat source and maximizing the coupling between temperature gradient and flow.
Microfabricated heat sources, with thermal efficiency of 10,000 K/W, offer nearly twoorders of magnitude lower power compared to surface mount resistors. For example,
Marangoni flows of 1,700 µm/s can be achieved in mineral oil with <20 mW power if a
microfabricated thermal probe is used. By combining the probe heat source with an
optimized carrier fluid, power consumption could potentially be reduced to < 1 mW.
Maximizing the surface temperature gradient requires that 1) the heat sources are
suspended in air above the sample (rather than embedded within the fluid), and 2) a low
thermal conductivity liquid is used.

In order to maximize the coupling between

temperature gradient and flow, the liquid should have a high temperature coefficient of
surface tension and low viscosity. As mentioned above, flow velocities can be improved
nearly 10 fold, and required powers can be reduced by >10 fold if a low thermal
conductivity, low viscosity carrier fluid such as Fluorinert is used. In addition to thesematerial properties, the liquid must be of high density (to allow droplets to float) andshould have low volatility.
Other issues to consider include liquid heating and evaporation.

Long-term

heating of the fluid can be prevented by actively cooling the liquid with a water bathunderneath the liquid sample. However, it is important to note that the viscosity of thefluid will increase at lower temperatures, and this will decrease flow speeds. Evaporationof droplets can be reduced by two orders of magnitude by using a multilayer oil system.

109

An immediate possibility for future work is reducing the size of the heater arrayby one order of magnitude using microfabrication. As shown in Chapter 4, this will give
benefits in terms of power consumption, because thin film heaters have better power
efficiency and thermal isolation as mentioned above. A smaller flow cell also allows
manipulation of smaller droplets, which reduces reagent consumption and allows forhigher density processing. Downscaling, does, however, have some implications. While
it is possible to generate sharper temperature gradients and large shear stress at smaller
length scales, absolute flow velocities do not improve at length scales below 100 µm dueto the increased viscous resistance in small convection cells. Therefore, downscaling
beyond one order of magnitude may not be beneficial.
A second area of future work is the general design and application of Marangoni
flows. Chapter 2 demonstrated the fundamental flow patterns resulting from point, line,
annular, and tapered heat sources, but it is clear that more complex flow patterns cangenerated by using other geometries, or combinations of them. Future research could
design complex flow patterns and investigate their application to droplet manipulationand other areas. This thesis provides a simulation model which can be used to design
these flow patterns from a hypothesized heat flux. Such flow patterns could prove to be
useful in the trapping, filtering, separating, or manipulation of particles for various assay
protocols. Physical heat sources of various shapes can be used to supply the heat flux; or,alternatively, optical approaches may offer a more scalable approach. Infrared lasers
have been shown to generate Marangoni flows [Sur04], and these methods could be
extended to design Marangoni flows for droplet manipulation and other applications.

110

A third area of work is investigating the interaction of Marangoni flows with
textured or patterned substrates. This is interesting from a physical perspective, as wellas practical applications. For example, it is possible that a complementary set of droplet
manipulation techniques may be achieved through the combination of Marangoni flows
and patterned substrates.
One excellent example of the practical use of Marangoni flows was shown by Hu
and Larson [Hu06]. It is well known that in an evaporating droplet, particles eventuallydeposit themselves along the outer circumference. The phonomena is responsible for thefamiliar ring shaped stains from dried coffee or paint. Marangoni flows can be used todirect the particles towards the center of the droplet, so that particles concentrate anddeposit themselves in the center of the droplet footprint. Hu and Larson demonstrated
this in organic liquids; but for aqueous liquids, a controlled method using probes could beequally useful.

Direct deposition of particles by droplet is important for the

manufacturing of high-density DNA microarrays, gene spotting, and several otherbiomedical techniques [Hu06].
Overall, the Marangoni effect could have other potential applications in
microfluidics. As mentioned by Feynman, and as demonstrated by this thesis, it is an
example of a physical phenomenon that becomes significant at the small scale. Due tothe prevalence of surface tension driven phenomena in nature, particularly at small lengthscales, the ability to control Marangoni flows, whether by temperature gradients or othermeans, could allow opportunities to interact with Feynman’s “marvelous biologicalsystems”.

111

APPENDIX 1: STRUCTURE, FABRICATION, AND OPERATION OF
THERMAL PROBES

Scanning thermal probes microfabricated devices are similar to AFM probes,
composed of a thin film cantilever with a sharp tip (< 100 nm diameter) at the far end.
What distinguishes the thermal probe from the AFM probe are the integrated heating andtemperature sensing elements, which control and simultaneously monitor the tip
temperature. Thermal probes were originally designed for scanning thermal microscopy[Wil86, Maj99], but later have been adapted for thermomechanical data storage [Mam92,
Chu97, Bin99, Vet00, Lee02, Kin02], thermal dip pen lithography [She04],
microcalorimetry [Li00], thermomechanical analysis and spectroscopy [Ham00, Pol01],

Fig. A1.1: The microfabricated thermal probe which is used to generate flow. (a)Schematic showing a polyimide cantilever overhanging the edge of a silicon substrate. The
integrated heater is located on the cantilever just beneath the tip. The shading along thelength of the cantilever indicates the thermal gradient that is present when the heater ispowered. (b) Scanning electron micrograph of the fabricated thermal probe, with inset
showing the pyramidal tip (from [Li03]).

112

and nanosampling [Rea02].
The microfabricated thermal probes are chosen as heat sources because they havea number of desirable features including fast heating times, low power consumption, andmost relevant to this disseratation, highly localized heating capabilities [Bas04B, Li03].
When placed near a liquid surface, they provide a local heat flux profile critical to both
toroidal and doublet flows. This chapter describes the probe structure, characteristics,
and simulations describing its interaction with the nearby fluid surface.

1. STRUCTURE

The microfabricated thermal probe is shown in Fig. A1.1. Its structure consists ofa thin film cantilever similar to an atomic force microscopy probe, except that it contains
an integrated joule heater near the tip [Li03]. The cantilever, composed of thermallyinsulative polyimide, extends from the edge of a silicon chip. A pyramidal tip points
downward at the distal end. An embedded thin film of gold forms the tip and as well as

Fig. A1.2: Scanning electron micrograph of a microfabricated thermal probe array[McN04B] used to generate flow. The inset shows the scanning tip with approximately
100 nm tip diameter.

113

the adjacent heater. The heater, which contributes the majority of the probe’s resistance,
also functions as a thermistor to monitor tip temperature. Electrical interconnect isprovided by thicker metal lines extending the length of the cantilever. The length andwidth of the cantilever as well as probe resistance vary depending on the type of probe.
In this work, two probe geometries are used: R01 (length 360 µm, width 42 µm,
resistance 25-40 Ω), and R02 (length 360 µm, width 120 µm, resistance 20-35 Ω).

Inaddition to the single probes, an 8-probe array reported in [McN04B] is also used to drive
multipole flow patterns. These probes are spaced 85 µm apart along a common shankand can be heated individually.

2. FABRICATION

Both single probes and multiprobe arrays are fabricated in the same low-cost, 7-

Fig. A1.3: Fabrication process. Details are given in the text.

114

mask process (Fig. A1.3) [McN04B]. A pyramidal mold for the tip structure is firstcreated by anisotropic etching of a (100) silicon wafer, masked by a thin layer of silicon
nitride (Fig. A1.3a). To obtain a sharper tip, the silicon is optionally thermally oxidized
at 950 ºC. A layer of sacrificial titanium is deposited below the cantilever structures andinside the mold to facilitate the release of the cantilevers (Fig. A1.3b). The cantileveritself is formed of two polyimide layers (HD Microsystems P2610) with two metal layers
embedded within. The first layer of polyimide is etched from the mold region (Fig.
A1.3c). A thin metal layer consisting of Cr/Au (100 Å / 1200 Å) is then deposited in themold to form both the metal tip and the resistor. A second, thicker metal layer consistingof Cr/Au/Cr (100 Å / 2500 Å / 100 Å) forms low-resistance electrical interconnects fromthe bonding pads to the probe tip (Fig. A1.3d). The top layer of polyimide is used toinsulate the metal and provide strength to the probe tip (Fig. A1.3e). Thick gold patterns
are deposited on top of the second polyimide layer for thermo-compression bonding (Fig.
A1.3f). The cantilevers are released by etching the sacrificial titanium layer in dilutehydrofluoric acid. Finally, the probe shank is manually flipped over (for which themechanical flexibility of the probe shank is essential), and a thermo-compression bond isformed at a temperature of 200 °C (Fig. A1.3g), resulting in a probe shank overhanging
the edge of the wafer die with the probe tip pointed away from the substrate.

3. OPERATIONAL CHARACTERISTICS

A temperature characterization of the probe under 3 different conditions is shownin Fig A1.4. In order to estimate the tip temperature, the probe is connected in a
Wheatstone bridge configuration which supplies electrical power and simultaneously
115measures the probe resistance. The tip temperature is calculated by multiplying thefractional change in resistance by the probe temperature coefficient or resistance (TCR),
which is calibrated in a separate procedure not detailed here.
Fig. A1.4 shows that the tip temperature increases linearly with respect to theapplied electrical power, and due to the low thermal conductivity of the polyimide shank,
can reach nearly 250 ˚C with less than 20 mW input power. The silicon chip, which has
a much larger mass and high thermal conductivity, acts as a heat sink and remains atroom temperature. As a result, a sharp temperature gradient is formed along the length ofthe cantilever. It is also notable that the probe temperatures depend greatly on theenvironment. For example, at the same input power, the temperature of a probe near asolid surface is 20 % less than when it suspended in air, and 90% less when submerged inwater. This is because the probe easily transfers heat to its surroundings, which is a key

Fig. A1.4: Temperature characterization of the R01 type thermal probe. The three lines
show the fractional resistance change of probe R01 as the input power was ramped
under various conditions. The probe is connected to a wheatstone bridge circuit which
supplies measures the probe resistance. tip temperature is calculated by the resistancechange116

capability for fluidic actuation.
The probe can be also heated and cooled very quickly, due to its small thermalmass. Fig. A1.5 shows a plot of the cooling time constant. To obtain this curve, theprobe was again connected to a wheatsone bridge to monitor its resistance. The bridge
supply voltage, set initially to 1 V, was stepped down from 0.1 V, and the bridge output
voltage was monitored. The temporal decay in voltage reflects the decrease in probe
resistance as it cools. The cooling time constant for most of the probes is around 5 ms,
and the heating time constant (not shown) is about 30 % smaller. Fast thermal cycling isbeneficial to nearly all applications of the thermal probe, but specifically in terms of fluid
actuation, it implies that the probe can quickly initiate fluid flow, and may be able todrive pulsatile or oscillating flows.

Fig. A1.5: Thermal time constant of a typical probe. The x axis shows time in 1 ms
divisions, and the y axis shows the voltage, with 50 mV/division. The time constant isapproximately 5 ms.

117

APPENDIX 2:
INTERACTION OF PROBES WITH THE LIQUID SURFACE

When placed near the surface of a thin liquid layer, the probes locally heat thesurface, providing the basis for both toroidal and doublet flow patterns. Due to theirbolometer-like design, the probes are not perfectly symmetric point heat sources;
however, this asymmetry proves to be particularly important in the orientation of doublet
flows. To study the interaction of the probes with the liquid surface, a 3 dimensionalmodel of the probe was constructed in Fluent 6.0 (Fluent Corp.), a finite element software
for computational fluid dynamics and heat transfer. In this model (Fig. A2.1), a 360 µm

Fig. A2.1: Schematic of simulation model, showing the thermal probe is held in air
above a liquid film. Symmetry is used to simplify the simulation so that only ½ of themodel is solved. All perpendicular field gradients are set to null at the mirror symmetry
plane

118

x 120 µm x 3 µm probe is suspended in air 15 µm above the liquid surface, and is angled
15° with respect to surface plane. A 7 µm-tall pyramidal tip protrudes from the far end of
the cantilever, and the other end is attached to a silicon substrate. The fluid layer, either
water or oil, has dimensions 1 mm x 1 mm x 100 µm. Volumetric heat generation rates,
ranging 1010-1012 W/m3, are applied in a region just above the tip to model the heater.
The substrate, meanwhile, is fixed at the ambient temperature of 300 K. Symmetry isused to simplify the simulation so that only half the model is solved, and all
perpendicular field gradients are set to zero at the symmetry plane. The lateral, upper,
and lower boundaries of the fluid and the local air are set to ambient temperature, and noslip boundary conditions are applied to each. Air convection is included in the model;
however, it plays a negligible effect on simulation results because heat conduction
appears to be the dominant heat transfer mechanism.

Fig. A2.2: Typical heat flux and temperature profiles on the liquid surface driven by
the probe. (left) A composite image showing qualitative heat flux and temperature
contours on the fluid surface. (right) This graph shows the parallel cross section of aheat flux profile supplied by the thermal probe to the liquid surface under typicalconditions. An approximate Gaussian fit is shown.

119

Typical simulation results are shown in Fig. A2.2. The graded heat flux whichappears on the fluid surface reflects the temperature gradient along the probe shank. The
temperature contours appear circular far away from the probe, resembling a point heatsource, but directly beneath the probe they also reflect the cantilever profile.

The

resemblance to a point heat source is relevant to toroidal flows (Chapter 2), while theasymmetry appears to be important to the orientation of doublet flows (Chapter 3).
Typical heat fluxes supplied by the probe are in the range of 103-104 W/m2, depending on
the input power to the probe, and the separation between the probe and liquid surface.
A side view of the temperature contours (Fig. A2.3) gives insight to the efficiencyof heat transfer. A sharp temperature gradient forms between the probe and the liquidsurface. Due to the low thermal conductivity of air, however, the heat transfer between
the probe and surface is not efficient. The temperature increase at the liquid surface istypically < 3 % of the temperature elevation of the probe tip. Furthermore, of the several
milliwatts of heat generated in the thermal probe, less than 1 % travels by conduction to

Fig. A2.3: Side view of simulation results, showing qualitative temperature contours in
the probe and the liquid surface. The magnitude of temperature depends on the input
power applied; however the contour shapes remain the same.

120

the fluid surface. The remaining heat is likely lost to the probe shank or ambient
surroundings. The transferred heat energy also decays quickly (~1/d2) as the probemoves away from the surface. For highest efficiency, therefore, it is important that theprobe be placed as close to the liquid surface as possible. To accomplish this, the probe
is usually mounted on a digitized micromanipulator in order to place it close to the liquid.
The shape of the heat flux profile also depends on the attack angle of thecantilever. Fig. A2.4 shows the changing heat flux profile for angles of 15, 30, and 45
degrees. Increasing the attack angle results in more symmetry, as expected. Whengenerating doublet flows, the probe angle proves to play a key role in determining which
way the doublet is oriented.

Fig. A2.4: Heat flux supplied to the liquid surface from the probe at various attack
angles. (simulation). The probe is suspended 15 µm above the liquid surface and isangled at 15, 30, and 45 degrees with respect the liquid plane. These contours are
qualitative; their magnitudes scale with the amount of input power. The line across the
middle of the heat flux plots represents the probe axis.

121

APPENDIX 3: SCANNING THERMAL LITHOGRAPHY MASKLESS, SUBMICRON THERMO-CHEMICAL PATTERNING OF
PHOTORESIST BY ULTRACOMPLIANT PROBESThis appendix introduces a scanning probe lithography (SPL) technique in which
ultracompliant thermal probes are used in the selective thermo-chemical patterning of thecommercially available photoresist. The micromachined single probe and multiprobearrays include a thin film metal resistive heater and sensor sandwiched between twolayers of polyimide. The low spring constant (<0.1 N/m) and high thermal isolation
provided by the polyimide shank is suitable for contact mode scanning across soft resists
without force feedback control.

The probes provide what is effectively a spatiallylocalized post exposure bake which crosslinks the photoresist in the desired pattern,
rendering it insoluble in developer. For 450 nm-1400 nm thick AZ5214E (Clariant
Corp.), line and dot features with sizes of 450 nm-1800 nm can be printed using probe
powers of 13.5-18 mW, and durations of 1-60 s per pixel. Variation of feature sizes withprocess parameters is described.

1. INTRODUCTION

With the increasing costs of photomasks – often in excess of 1 million dollars forstate of the art CMOS processes – alternatives to optical lithography have been sought,
122

particularly for low-volume manufacturing and prototyping in conventional processes.
As a maskless lithography approach, scanning probe lithography (SPL) offers thepromise of high spatial resolution (which is not limited by the diffraction of light) and forlow volume applications, substantial savings in mask and equipment costs.
It is interesting to note that as methods in scanning probe microscopy developed
over the last few decades, most have been applied to lithography [Nyf97]. Years after theinvention of the scanning tunneling microscope (STM) in the 1960’s, scanning probe
lithography was born when an STM was later used to selectively oxidize hydrogenterminated Si surfaces with nanometer resolution [Dag90]. Likewise, the atomic force
microscope (AFM), originally used for mapping topography, was later modified to‘scratch’ thin metals [Sil93] and soft polymers [Soh95], again with resolution in the 10’sof nanometers. The near field scanning optical microscope (NSOM), which employs
scanning probe tips to focus light, was used directly to optically pattern photoresist withresolutions beyond the far-field diffraction limit [Smo95]. Several other lithographic
techniques have grown out of AFM and STM technology, two of which are electrostatic[Lyu03] and dip-pen lithography [Pin99].
Scanning thermal microscopy (SThM), introduced in 1986, has also foundcomplementary efforts in lithography, but nearly all are based on thermomechanicalindentation, that is, the the use of heat and pressure in submicron tips to etch pits intopolymers with glass transition points. In early research efforts, heat was provided by an
external laser pointed at a conventional AFM tip [Mam92], and later by thin film heaters
embedded in the cantilever [Chu96]. Thermomechanical indentation has been pursued
with interest in ultra high density data storage, the most notable device being the IBM123

“millipede” [Vet00]. In this work, we demonstrate that scanning thermal probes can beapplied towards lithography by thermally catalyzing a chemical reaction in a submicron
region (Fig. A3.1) rather than by thermomechanical indentation. We have demonstrated
this principle on the positive tone photoresist AZ5214E (Clariant Corp.) in a processsimilar to image reversal. The use of localized heat to pattern this resist has beenpreviously explored by focusing semiconductor lasers [Kuw02].

Some potential

advantages of the proposed method are that it is less prone to tip wear and produces lessdebris when compared to purely mechanical SPL techniques; however, it does require
scanning over soft photoresist. An enabling device for this technique has been theultracompliant probe technology reported previously by our group [Li03, McN04A],
which minimizes damage to both the sample and the probe tip. Both single probes and 8
probe arrays are shown to provide thermo-chemical patterning of photoresist.

Fig. A3.1: Process flow for scanning thermal lithography of AZ5214E resist. (a) Flood
exposure generates photoacids. (b) Spatially localized thermal cross-linking occurs
under the heated probe tip (inset) as a result of the photoacids and elevatedtemperatures. (c) The insoluble cross-linked region remains after development in
TMAH developer.

124

2. PROCESS AND DEVICE CONCEPTS

Several structural features of the ultracompliant probes (Fig. A3.2) make themwell suited towards the lithography process, the most important of which is use of a thinfilm polyimide as the structural material for the cantilevers. The excellent thermal
resistance of the polymer allows the probe tips to be heated to temperatures of nearly
300ºC by embedded thin film heaters operating at <20 mW, while the low spring constant(~0.08 N/m for the single probe) allows for scanning over photoresists and other softpolymers in the absence of mechanical feedback without scratching the resist and withminimal wear to the tip. The elimination of force feedback is especially important when

Fig A3.2: (a) Schematic of the micromachined single probe, and (b) SEM of the 8-probearray surface micromachined from polyimide on a Si substrate. Thin film resistors
integrated on the tip of the cantilevers allow the individual probes in the array to beheated independently of one another.

125

scaling to arrays of probes. If rigid cantilevers are used, tip height non-uniformity acrossthe array can result in significant variation in contact force when it is lowered to thesubstrate, necessitating feedback control at the probe level to prevent excessive force inany one tip. The low spring constant in the ultracompliant array passively accomplishes
the same function, thus eliminating the need for force feedback. An additional feature of
the array is that each probe has individual heater control which can allow for independent
patterning if desired.
Both single probes and multiprobe arrays are fabricated in the same low-cost
micromachining process in which a thin film metal bolometer is sandwiched between two
insulating layers of polyimide. The thin metal film, consisting of 300-1200Å Au between
two adhesion layers of 100Å Cr, is molded into an anisotropically wet-etched notch in the
Si substrate to form the scanning tip. Two lines extending outwards from the tip region
form the heating element. Electrical connection to the bolometer is provided by thicker
metal lines extending the length of the cantilever. The total resistance ranges from 20200 ohms depending on design and process parameters. The probe is then released fromthe substrate, flipped out over the die edge, and held in place by a thermo-compression
bond between two thin films of Au.
With regard to the patterning of the sample by the probes, the photoresist
AZ5214E is one of the very few positive tone photoresists that can function as a negative
tone resist by a process called image reversal. Conventional image reversal begins with apatterned UV exposure which generates photoacids in unmasked regions. A subsequent
post exposure bake (PEB) thermally activates a crosslinking reaction catalyzed by thephotoacids in the previously exposed regions [Gij86]. The crosslinked regions become126insoluble in alkali developer, and insensitive to any further UV processing. The substrateis then flood exposed to solubilize all non-crosslinked regions. Development in tetramethyl ammonium hydroxide (TMAH) leaves a negative photoresist image.

3. EXPERIMENTAL RESULTS

Temperature calibration of the single probe is relatively straightforward because
the fractional change in the probe resistance (∆R/R) is directly proportional to theincrease in tip temperature (∆T) by a constant K. The thin film heater accounts for the
majority of the probe’s resistance and results in a linear relationship between themeasured resistance and tip temperature. To determine the constant K, the single probe
cantilever was immersed in water and the current was ramped until bubble formation andrapid evaporation was observed. Water was found to boil at a 2.16% increase in probe
resistance, and by correlating this to a 75ºC increase in tip temperature, K was found to
be 288 ppm/ºC. Repeating the same experiment with isopropyl alcohol (boiling point
85ºC) resulted in a virtually identical figure.

Using the above calibration, the tip

temperature can be correlated to the measured resistance during probe operation. The
probes can be heated to approximately 300ºC before high temperatures begin to damage
the cantilever structures. It should be noted that the temperature vs. power relationshipdiffers depending on the degree of thermal isolation from the surrounding environment.
A probe operating in proximity or in contact with the substrate requires about 30% more
power than when suspended in air due to the heat loss to the substrate. Nevertheless, thetypical input powers needed to reach temperatures in excess of 250ºC while in contact
was <20mW.
127

The scanning thermal lithography (Fig. A3.1) proposed for this effort is similar tothe conventional process, except that it involves patterning the post exposure bake insteadof the initial exposure. AZ5214E photoresist at full concentration was spun on Si wafers
to obtain a thickness of 1.4 µm, and diluted 50% with PGMEA solvent (Nano EBR,
Clariant Corp.) to obtain 450 nm thickness. Further dilution resulted in poor uniformity;
however, in general it is expected that thinner resists will permit smaller feature sizes tobe patterned (discussed later in this report).

After softbaking, the resist was flood

exposed to generate photoacids globally. The heated thermal probes were then scanned
across the surface point-by-point, each point being heated anywhere between 1 and 60 s.
Regions under the probe tip crosslink and become alkali insoluble. The resist wasdeveloped in diluted TMAH (0.21N) in order to maintain the highest contrast between
crosslinked and noncrosslinked regions [Spa85].
To fully crosslink AZ5214E requires temperatures of about 90ºC, but it was foundthat simply biasing the probe tip at this temperature was inadequate due to the thermal
contact resistance between the tip and the photoresist. Except where indicated, the single
probe was biased at 18 mW, corresponding to a tip temperature of 275ºC. In addition, thesubstrate was biased at 45ºC using a hot plate in order to further reduce the amount ofheat that the probe needed to provide. Tests showed that when the contact force wasmade excessively high by flexing the cantilever towards the substrate, the increased
pressure in combination with the high tip temperature resulted in thermomechanicalindentations penetrating all the way through the resist, and no thermal patterns wereobserved after development. Conversely, weak contact forces resulted in poor thermal
contact, also resulting in no pattern formation. An intermediate contact force of about128480 nN was found to be successful. The advantage of using flexible probes is again
noted here in that once the probe is biased at some contact force, that force does notchange significantly over the sample topography, thereby increasing the uniformity of thepatterned structures.
Using the process described above, submicron dots and lines were obtained, insome cases when the photoresist was partially developed, and in other cases when it was
fully developed. It was found that dot sizes could be well controlled by the changing the

Fig. A3.3: Dot sizes can be controlled by the heating times as well as heating power. (a)Reduction in size with shorter heating times using a probe biased at 18 mW on 450 nm
resist. (b) Dot sizes vs. heating time for 18 mW and 13.5 mW power.

129

probe temperature as well as the heating times (Fig. A3.3). Using an 18 mW bias on 450
nm resist resulted in features that ranged from 400 nm-1800 nm as heating times wereincreased from 1-60 s. Reducing the power to 13.5 mW power resulted in the samefeature sizes, but required longer heating times. The above results were found afterpartially developing the 450 nm photoresist. Features patterned at 18 mW for longer than
30 s remained after full development of both 1.4 µm and 450 nm resist (Fig. A3.4).
Biasing at high powers and heating for longer times results in a higher degree ofcrosslinking because the crosslinking reaction is, in effect, both temperature and timedependent.
Feature sizes shrink with photoresist thickness due to the decreased lateral flow ofheat. Two dimensional ANSYS heat flow models (Fig. A3.4a) qualitatively show that as
the thickness of the resist is reduced below the diameter of the scanning tip, thecylindrical flow of heat results in features of approximately the same size as the tip. A
thick resist permits the heat to spread laterally, increasing feature sizes. For example,
using identical heating powers and times (18 mW, 30 s) on both 1.4 µm and 450 nm
resist produced dot sizes of 590 nm and 450 nm after full development of the photoresist(Fig. A3.4b). The use of a thick resist also runs the risk of creating reentrant crosssectional profiles which can be undercut during development.
The 450 nm dot size was the minimum feature size obtained in fully developed
dot patterns in our process using photoresist of approximately the same thickness.
Further scaling down of features sizes for the purposes of lithography can beaccomplished by using sharper tips and thinner resists, particularly those which arechemically amplified (chemical amplification can also help to reduce heating times and130Fig A3.4: (a) Finite element simulations with photoresist thicknesses of 1.4 µm, 450 nm,
and 100 nm show that the geometry of heat flow becomes vertical as the photoresist isthinned below the diameter of the tip, resulting in smaller features. (b) Dots obtained
after fully developing 1400 nm and 450 nm resist follow the same trend. The roughened
surfaces in the micrographs are due to an Au/Pd layers sputtered for SEM.

increase throughput). The diameter of the scanning tips in the present design can bemade as small as 50 nm using oxide sharpening [Lee00], and others have reported custom
fabrication of thermal probes with tip sizes as small as 20 nm [Shi01].
Line patterns formed by heating successive pixels are shown in Fig. A3.5a. Linewidths of 500 nm were observed in partially developed resist at effective speeds of 200
nm/sec, while slower speeds of 10-20nm/sec were needed to retain the lines after fulldevelopment. This is likely because a stronger degree of crosslinking was required toprevent undercutting of the resist. The torsional flexing of the compliant cantileverresulted in some line distortion (Fig. A3.5b), but this can be minimized by lifting the131

Fig. A3.5: (a,b) Lines of 500 nm width written by patterning successive dots with 200
nm spacing (1 s heating per dot) can be seen after partial development of the photoresist.
(c,d) Parallel lithography is demonstrated where two adjacent probes in the 8 probe arraysimultaneously generate the same pattern.

probe between each pixel. The structure of the probe itself could also be modified toprovide a stiff torsional spring constant while maintaining a low vertical spring constant.
The final experiment demonstrated the use of the multiprobe array to perform
parallel lithography. The 8 probe array was used to write pixels at 5 µm pitch, and thepatterns produced by two adjacent probes are shown in Fig. A3.5(c-d). Probe tips werelifted up between pixels, thereby reducing the line distortion; however, during the courseof this experiment, external vibrations shifted some of the probes, resulting in double
patterning in some areas. With the exception of this, the feature sizes are fairly uniform
between probe tips. Although not shown in this experiment, the probes can also be
operated at different powers, allowing the formation of independent patterns.
During the course of the experiments, reliability of the probes was found to be
excellent in that all of the probes appeared to run many samples with no noticeable tip
damage or deterioration in thermal performance. Longevity of scanning probe tips is an132

important aspect to consider if they are to be used in a manufacturing process.
In conclusion, this effort has demonstrated that scanning thermal probes can beused, both singly and in parallel, in the thermo-chemical patterning of AZ5214E. While
the resolution of this technique can be scaled down in a relatively straightforwardmanner, the lessons are: first, the throughput can be addressed to some degree by the useof multiprobe arrays; second, pixel sizes can be controlled by heating times and powers,
and finally, the procedure is less costly in the sense that it does not require photomasks or
optics, nor does it require a vacuum or UV filtered environment.

Ultimately, theresolution and throughput of this technique are determined by the size of the tips, thenumber of probes that can be scanned in parallel, and the thickness and thermal
sensitivity of the resist. In a broader sense, this work has shown that scanning thermallithography can be used for patterning any thin film for semiconductor and biologicalapplications or for triggering a chemical reaction at the surface of a material.

133

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