SEMI F47
Voltage Sag Immunity Test Report
forPower Supply CP10.241-ETC

DUT
PictureOther devices covered by this report:
CP10.248
Unit with build-in display

Date: 01.09.2023

Document revision: 1

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SEMI F47 Test Report
Document number

CP10.241-ETC Semi F47 Rev1 TR1PCTM number

PCTM-27 (1)Standards

SEMI F47-0706 (July 2006)
SPECIFICATION FOR SEMICONDUCTOR PROCESSING EQUIPMENT - Voltage
Sag Immunity Compliance Tests
IEC 61000-4-11 2004 +A1:2017
Electromagnetic compatibility (EMC) - Part 4-11: Testing and measurement
techniques - Voltage dips, short interruptions and voltage variations
immunity tests for equipment with input current up to 16 A per phase

Applicant

PULS GmbH
Elektrastraße 681925 Munich, Germany

Test Laboratory

PULS Vario GmbH
Kranichberggasse 61120 Vienna, Austria

Test Engineer

Thomas Ramel, Daniel Schwayer

Test Date

29.08.2023

Description of Test Device:

Built-in power supplies for DIN-Rail mounting

Devices under Evaluation:

CP10.241-ETC
Input: AC 100-240V, DC 110-150V, Output: DC 24-28V, 10A

S/N of Devices:CP10.241-ETC: S/N: 25955010 A

Application Details:

Input voltage:
Input frequency:
Output load:Date: 01.09.2023

1-Phase AC 208V
50 or 60Hz
240W

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PASS/FAIL Criterions:

In accordance with paragraph 7.8.2 a) of SEMI F47-0706
The output voltage is not allowed to deviated more than 5% of the initialvalue.

Test Result:

PASS
The test device passed all essential SEMI F47-0706 tests according to thedefined application details without any limitations and is qualified to bear thefollowing approval mark:Since DC power supplies, as covered in this test report, are only componentsof a semiconductor processing equipment, the tests of the SEMI F47 standard
were conducted with selected rated characteristics of the DC power supply.

The system integrator of the final semiconductor processing equipment
needs to judge if the results of this test report are compatible with the SEMI
F47 requirements of his system or if test data under other operating
conditions are additionally required.
The system integrator also needs to judge if the results of the inrush current
peaks are compatible with the selected external fuses for input protection.
The system integrator also needs to be aware about aging effects. It isexpected that the ride through time can be reduced by 15% at end of thespecified lifetime expectancy.
A SEMI F47 certificate is not intended for this type of component, however
the product fulfils the general requirements and can be marked with thefollowing symbol.
Approved

Harald Etlinger
Sr. Qualification Eng.
PULS Vario GmbH, Vienna

Date of Approval

01.09.2023

Date: 01.09.2023

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Copy of marking plate:

List of Test Equipment
TypeTest generator:
Load:
Oscilloscope:
Oscilloscope:
Diffential probe.
Current Probe:
Communication Interface:

ModelKikusui PCR3000WE2
Chroma 63201 - 2.6kW
LeCroy WS454
LeCroy WS454
LeCroy AP031
LeCroy CP150
EtherCAT Testdevice

Inventory number10372
10054
10129
10127
10259
10280
(MUC) 800.20 [2]The test equipment complies with the requirements of IEC 61000-4-11.
The peak current capability of the test generator was evaluated according Annex A of IEC 61000-4-11 and is able todeliver minimum 32.7A.
Test Specification for SEMI F47 compliance
Voltage Sag Immunity according to the following table:
Sag depth#1
50%
70%
80%

Duration
200ms
500ms
1000msDuration at 50 Hz
10 cycles
25 cycles
50 cycles

Duration at 60 Hz
12 cycles
30 cycles
60 cycles#1 Sag depth is expressed in percent of remaining nominal voltage. For example, during a 70% voltage sag on a 200
volt nominal system, the voltage is reduced during the sag to 140 volts and not 60 volts.

Date: 01.09.2023

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Test Setup
The unit under test in normal operating condition mounted in climate chamber.
The input is connected to an AC Source. The input voltage is measured with a 100:1 differential probe and the input
current is measured with current probes. These probes are connected to oscilloscopes.
The output is connected to an active load. The output voltage is connected directly to the oscilloscope.
Input and output voltages are measured with oscilloscope #1 and input currents with oscilloscope #2.
Active EtherCAT communication is simulated with the "EtherCAT Testdevice 800.20 [2]" during the tests.

Date: 01.09.2023

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Voltage Sag Results
90
Ridethroughchart807060
50

4030
20
1000.010

0.100
Limit

1.000
208V/50Hz - L1-N

10.000208V/60Hz - L1-N

Worst Case pictures of Norm Conditions
50Hz

Worst Case pictures of Norm Conditions
60Hz

Date: 01.09.2023

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Conducted Tests at 208V 50Hz
Input voltage
Input Frequency
Output voltage
Output current
Ambient temperature

208Vac50Hz
24V
10A
25°C

Sag duration [s]Voltage remaining [%]0.020
00.200500.500
70
180
1080

Positive peak current
Negative peak current
14.4-1.9
6.2-4.13.7-2.8
3.1-2.5
2.8-2.5

Informational measurements
Sag duration [s]Voltage remaining [%]0.020
00.03500.055130.075
160.085
170.105
17Sag duration [s]Voltage remaining [%]0.175
190.200
190.255
190.500
20136
1037

Conducted Tests at 208V 60Hz
Input voltage
Input Frequency
Output voltage
Output current
Ambient temperature

208Vac60Hz
24V
10A
25°C

Sag duration [s]Voltage remaining [%]0.016
00.200500.500
70
180
1080

Positive peak current
Negative peak current
14.1-5.3
6.6-4.1
3.7-2.8
3.1-2.2
2.8-2.5

Informational measurements
Sag duration [s]Voltage remaining [%]0.016
00.03500.055130.075
160.085
170.105
17Date: 01.09.2023

Sag duration [s]Voltage remaining [%]0.175
180.200
190.255
190.500
20136
1037

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Inrush current measurements according 61000-4-11 at 208V 50Hz
Input voltage
Input Frequency
Output voltage
Output current
Ambient temperature

208Vac50Hz24V
10A25°C

Peak input current measurements on unit under test:
First two measurements turn off input power for EUT for 5 minutes and thenMeasure peak input current when AC turned on at 90°:
7.2
Measure peak input current when AC turned on at 270°:
6.2
Next two measurements turn on the input power for EUT for at least 1 minute then turn off input power for 5s andon again.
Measure peak input current when AC turned on at 90°:
6.6
Measure peak input current when AC turned on at 270°:
6.6

Inrush current measurements according 61000-4-11 at 208V 60Hz
Input voltage
Input Frequency
Output voltage
Output current
Ambient temperature

208Vac60Hz24V
10A25°C

Peak input current measurements on unit under test:
First two measurements turn off input power for EUT for 5 minutes and thenMeasure peak input current when AC turned on at 90°:
6.6
Measurepeakinput
current
whenAC
turnedonat270°:
5.9 1 minute then turn off input power for 5s andNext two measurements turn on the input power for EUT for at leaston again.
Measure peak input current when AC turned on at 90°:
6.2
Measure peak input current when AC turned on at 270°:
6.2

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Operating conditions and their influence in test results:a) Ambient temperature:
Control measurements show that the ambient temperature has only a minor influence in the ride-through time test
results.
Depending on the used topology to reduce the input inrush current, the ambient temperature can have a major
influence in the arising peak current after the sag test. Therefore, tests were performed at ambient temperatures of25°C and +60°C.
It is assumed that semiconductor processing equipment is never used at lower temperatures than +25°C. Although
the power supply itself is specified down to -25°C, a test at such low temperatures is not performed.
b) Mains frequency 50Hz vs. 60Hz:
Control measurements show that 50Hz testing is more critical than 60Hz testing.
Therefore, unless otherwise noted, all tests were performed with a mains frequency of 50Hz.
c) Output voltage 24V vs. 28V:
The ride-through time depend on the stored energy in the input capacitors and the amount of output power. Theoutput voltage is not essential as long as the output power is constant.
The adjusted output voltage has no influence in input currents peaks after input voltage sags.
Therefore, unless otherwise noted, all tests were performed with an output voltage of 24Vdc.

Date: 01.09.2023

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APPENDIX
Informational measurements at 200V
Input voltage
Input Frequency
Output voltage
Output current
Ambient temperature

200Vac50Hz
24V
10A25°C

Informational measurements
Sag duration
Voltage remaining[s][%]
0.02000.035
00.055140.075
170.085
170.105180.175
190.200
190.255
200.500
201
38
1038

Positive peak current
Negative peak current
[A]
[A]
14.7
-2.2
12.8
-24.1
13.1
-25.6
13.1
-24.7
25.6
-12.5
24.7
-12.5
12.5
-23.4
16.6
-11.9
12.5
-23.1
15.6
-11.6
11.6
-5.6
11.9
-5.6

Picture with highest Current

Date: 01.09.2023

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Informational measurements at 230V
Input voltage
Input Frequency
Output voltage
Output current
Ambient temperature230Vac50Hz
24V
10A
25°C

Informational measurements
Sag duration
Voltage remaining
[s]
[%]
0.020
0.035
0.055
0.075
0.085
0.105
0.175
0.200
0.255
0.500
110

Positive peak current
[A]
00
12
1515
16
17
17
17
18
33
33

14.7
6.2
12.2
13.4
25.6
25.6
13.4
16.2
13.7
15.9
12.5
12.2

Negative peak current
[A]
-1.9
-26.6
-26.9
-27.2
-13.4
-13.4
-25
-11.2
-25.6
-10.9
-5.9
-5.6

Picture with highest Current

Date: 01.09.2023

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