S Meeting for announcing results of FineMEMS Project(1) Purpose
This conference is held to disclose the interim achievements of the “Highly Integrated and Complex MEMS Manufacturing
Technology Development Project,” a three-year project that has been implemented since FY 2006 by NEDO. This project, also known as
the “Fine MEMS” project, seeks to develop key manufacturing technologies for the creation of complex and integrated functions throughthe creation of advanced tiny three-dimensional structure processing technologies and the use of nanomaterials and different types ofmaterials. This is a key technology supporting the development of the MEMS industry.
(2) Program
Highly Integrated and Complex MEMS Manufacturing Technology Development Project (FY 2006 - 2008) (commissioned by / subsidy
provided by NEDO)

Meeting for announcing results of FineMEMS Project
Date & Time: July 31, 2008 (Thursday) 12:30 - 4:30 p.m.
Venue: Tokyo Big Sight (Tokyo International Exhibition Center, West Hall 1)
19th Exhibition Micromachine/MEMS special venue
Sponsor: New Energy and Industrial Technology Development Organization (NEDO) / Micromachine Center
Support: Ministry of Economy, Trade and Industry (planned)
Attendance: Free of charge but first-come-first-serve due to limited seating capacity (200)and quantity of extended abstracts
Session 1
12 : 30 - 12 : 35
12 : 35 - 12 : 50
12 : 50 - 13 : 10
Session 2
13 : 15 - 13 : 35
13 : 35 - 13 : 55
13 : 55 - 14 : 15
14 : 15 - 14 : 35
14 : 35 - 14 : 45
Session 3
14 : 45 - 15 : 05
15 : 05 - 15 : 25
15 : 25 - 15 : 45
15 : 45 - 16 : 05
16 : 05 - 16 : 15
Closing
16 : 20 - 16 : 30

Opening
Chair: Tomoyuki Koike, Micromachine CenterOpening Remarks
Akira Uehara, NEDOMEMS industry strategies and expectations for the Fine MEMS Project
Motoki Korenaga, Ministry of Economy, Trade and Industry
Overview of Fine MEMS Project
Isao Shimoyama, The University of Tokyo
Achievements of Fine MEMS Project consignment projects (1)Chair: Mitsumasa Koyanagi, Tohoku University
Selective nanomachine structure formation technology
Isao Shimoyama, University of Tokyo
Selective modification technologies for biomaterials (proteins, etc.)
Yoshio Suzuki, AIST
Selective formation technologies for nanomaterials (CNT, etc.)
Kenji Hata, AIST
Low-stress dicing technology for multilayer wafer level joints
Masayuki Fujita, Institute for Laser TechnologyBreakAchievements of Fine MEMS Project consignment projects (2)Chair: Susumu Sugiyama, Fine MEMS Project Subleader
Development of a fine MEMS system design platform
Professor Gen Hashiguchi, Shizuoka University
General monolithic manufacturing technologies for MEMS - semiconductor processing (the search for a new sensing principle)
Hisayuki Toriyama, Ritsumeikan University
MEMS - semiconductor transverse wiring technologies (high-density low temperature laminate integration mounting technologies)
Jun Akedo, AISTMEMS - semiconductor transverse wiring technologies (high-density low temperature laminate integration mounting technologies) Mitsumasa Koyanagi, Tohoku University
Fine MEMS knowledge databaseToshio Sakamizu, Micromachine Center
Closing Remarks

Keiichi Aoyagi, Micromachine Center

S Micro / Nano 2008 MEMS Forum(1) Purpose
The MEMS Forum is a forum for the exchange of information and views regarding the various activities of the MEMS Industry Forum.
Its purpose is to achieve a deeper common recognition of the issues that must be resolved for the expansion and development of MEMS
related industries. The Forum introduces the status of activities by the MEMS Industry Forum and affiliate members (local clusters,publicly funded laboratories and academia), from the perspective of building an infrastructure for the MEMS industry and the creationand development of a MEMS technical infrastructure through industry-academic collaboration.
(2) Program

Micro / Nano 2008 MEMS Forum--- For the Development of MEMS Industries --Date & Time: August 1, 2008 (Friday) 10:30 a.m. - 4:35 p.m.
Venue: Tokyo Big Sight (Tokyo International Exhibition Center, West Hall 1)
19th Exhibition Micromachine/MEMS special venue
Sponsor: MEMS Industry Forum / Micromachine Center
Attendance: Free
Chair: Shun'ichi Adegawa, Micromachine CenterOpening
10 : 30 - 10 : 35
Session 1
10 : 35 - 10 : 50
10 : 50 - 11 : 20
11 : 20 - 11 : 40
11 : 40 - 12 : 00
12 : 00 - 13 : 10
Session 2
13 : 10 - 13 : 20
13 : 20 - 13 : 40
13 : 40 - 14 : 00
14 : 00 - 14 : 20
14 : 20 - 14 : 30
Session 3
14 : 30 - 14 : 50
14 : 50 - 15 : 1015 : 10 - 15 : 30
15 : 30 - 15 : 50
15 : 50 - 16 : 1016 : 10 - 16 : 30
Closing
16 : 30 - 16 : 35

Opening remarks
Koichi Imanaka, Assistant Director, MEMS Industry Forum
Advancement of MEMS industries and technologies
Overview of MEMS Industry Forum activities
Keiichi Aoyagi, Micromachine Center
Strengthening of MEMS industry infrastructure
Isao Shimoyama, The University of Tokyo
Toward MEMS market expansion: 1st generation MEMS - 3rd generation MEMS (BEANS)
Junji Adachi, Micromachine Center
Technical strategy roadmap for the MEMS field
Hideaki Watanabe, NEDO
Lunch / breakIndustry-Academic Collaboration Session
Organizer: Professor Kazuo Sato, Nagoya University
Remarks at the beginning of the industry-academic collaboration session
Kazuo Sato, Nagoya University
Wearable microsensors: an advanced general sensing technology for achieving a safe and secure society
Kazusuke Maenaka, University of Hyogo
Mass production of next-generation optical elements through ultra-precision micro three-dimensional machine processing
Eiji Shamoto, Nagoya University
Introduction to the Micro Energy Research Council, Micro/Nano Optical Specialist Forum, Japan Society of Mechanical Engineers
Hiroki Kuwano, Tohoku University
BreakIssues for MEMS Industry Development
International standardization trends in MEMS fields
Professor Kunie Owada, Teikyo University
AIST training of micro/nano manufacturing personnel, focusing on industry-academic personnel training partnership projects
Ryutaro Maeda, AIST
Strengthening of MEMS Foundry infrastructure
Susumu Sugiyama, Ritsumeikan University
Activities for the establishment of a MEMS foundry network
Fumihiko Sato, Omron Corporation
Case studies of the use of MEMS technologies in research and development assistance by the Kanagawa Industrial Technology Center
Manabu Yasui, Kanagawa Industrial Technology Center
MemsONE functions and future plans (MEMS design and analysis support system) Ver. 1.1
Yukihisa Maeda, MemsONE Consortium, Nihon Unisys Excelutions
Closing Remarks

Keiichi Aoyagi, Micromachine Center3