PIglide Air Bearing Technology
N A N O M E T E R P R E C I S I O N , M U LT I - A X I S M O T I O N ,S TA N D A R D & C U S T O M D E S I G N S

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PIglide

The Step Ahead with Air Bearing
Technology
Frictionless High-Precision Positioning

Velocity Stability and Scanning

A direct-drive motor and high-resolution encoder can position a moving carriage supported by an air bearing to within
nanometers in a linear application or within tenths of arcseconds in rotational applications. The lack of friction andmechanical contact means there is minimal hysteresis orreversal error, making it highly repeatable and ideal for many
inspection and manufacturing operations. Stiction is virtually eliminated, improving resolution capabilities, position
repeatability can be obtained within a few fundamental encoder counts. Similar precision can be obtained by piezo
flexure guided stages, however over much smaller travel
ranges.

The lack of mechanical bearing elements means there isnothing to get in the way of smooth, controlled velocity(stability to better than 0.01%). Experiments and processes
like inertial sensor testing, tomography, wafer scanning,and surface profiling require continuous motion at a tightly
controlled speeds are best served by air bearing systems.
High Guiding Accuracy
Linear air bearing stages have incredibly straight and flat
travels, measured in the 100’s or 10’s of nanometers and subarc-second pitch, roll, and yaw errors. Rotary stages have tilt
(wobble) errors less than 1 arc-second. Additionally, theangular performance of an air bearing is remarkably repeatable. This guarantees optimal part quality and measurement
reliability for applications such as optics inspection, semiconductor inspection, and medical device manufacturing.

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Air Bearing Technology

The Step Ahead with the Full Rangeof PI Technologies
Experience with Air Bearing Technology

Flexible Axis Configuration

PI is building on over 200 man-years of in-house air bearing
experience and offers comprehensive precision air bearing
motion control and positioning products and systems.

n	Single axis linear stages

With 4 decades of experience in piezo nanopositioning systems design and motorized precision positioning equipment,the new air bearing systems capabilities are a natural andlogical extension of PI’s precision motion offerings.
Core Technology Inhouse
Having all the core technologies available in-house allows
PI to design and manufacture excellent products. Optimum
performance is achieved by extensive simulations of relevant
components, from the magnetic field for the motor layout,
the FEM simulations of stages, to the control algorithm
design. Keeping the number of parts low secures high reliability of the system.

nRotary stagesn

XY Planar Scannersn

Non-motorized linear and rotary bearingsnHemispherical bearings

nRotary air bearing spindles

PI serves both the research and industrial markets.
Customization
PI is in the unique position to cover the whole motion range
from finger-tip sized nano-positioners to large scale stages
with long travel ranges, through a plethora of different driveand guiding systems tailored exactly to the customer‘sneeds.
By combining extremely responsive engineering consultative support and lean manufacturing techniques, PI is able
to provide the highest quality customer service. Maximum
performance of precision systems is achieved thru extensive
design and analysis expertise, using equipment built inhouse with proprietary techniques.

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PIMag®

Magnetic Direct Drive Technology
Drive technology and control know-how as well as an expertise in bearings and encoders allow for a broad range ofmotors for system integration. Proprietary developments
also include high-resolution force sensors for manufacturingand test equipment.

Drive Technology Beyond Standardn	Highest accelerations up to 60g with resonance motorn	Highest force density for single phase linear motors

with reluctance motor and cylindrical Halbach arraysn	High force density and low weight with linear Halbach

arraysIronless Linear MotorsnHigh acceleration and velocity

Guiding Systemsn	Linear stages, planar scanners, PIMag® 6Dn	PIglide air bearings for frictionless motion and optimum

positioning systemstraightness and flatnessn	Torque motors for rotation stagesnActive magnetic guidings align flatness during motionn	Flexure guidings provide frictionless motion over short

Voice Coil DrivesnHigh dynamics for fast scanning and positioningn

OEM actuators, linear scanners, HexapodsnOptional force sensors

MOTIONstrokesn	Ball and roller bearings from the leading suppliers|POSITIONING

Technology

The Broadest and Deepest Portfolio
The technological scope of the PI Group is unique worldwide.
PI develops, manufactures and qualifies all its core technologies itself. Thus PI is independent of components available
on the market and offers individual solutions that go beyond
the state of the art. Through its high measure of flexibility, PI
plays a pioneering role in precision positioning and enables
PI customers to benefit from distinct competitive advantages.

MOTION|Guiding systems

Core Technologiesnn	Piezo components,n	Nanometrology sensors

nactuators and motorsnElectronic amplifiers

Magnetic drivesnDigital controllersnSoftwaren	Air bearing technology

POSITIONING

|POSITIONINGGER MANYPI Karlsruhe
PI Ceramic
PI miCosA M E RICA
PI USAE U ROPE
PI UK
PI France
PI Italy

ASIA
PI Japan
PI Shanghai
PI Singapore
PI Korea

PI USA

Subsidiaries

USA and Canada (East)

JAPAN		PI (Physik Instrumente) L.P.
16 Albert St.
Auburn, MA 01501
Phone +1 508 832-3456
Fax+1 508 832-0506
info@pi-usa.us
www.pi-usa.us

PI Japan Co., Ltd.
Tokyo
info@pi-japan.jp
www.pi-japan.jp

PI Japan Co., Ltd.
Osaka
info@pi-japan.jp
www.pi-japan.jp

FRANCE

UK & IRELAND

PI France S.A.S.
Montrouge
info.france@pi.ws
www.pi.ws

PI (Physik Instrumente) Ltd.
Cranfield, Bedford
uk@pi.ws
www.physikinstrumente.co.uk

ITALY

SOUTHEAST ASIA

Physik Instrumente (PI) S. r. l.
Bressoinfo@pionline.it
www.pionline.it

PI (Physik Instrumente)
Singapore LLP
Singapore
info-sg@pi.ws
www.pi-singapore.sg
For ID / MY / PH / SG / TH / VNM / TW

KOREA

CHINA

PI Korea Ltd.
Seoul
info-kr@pi.ws
www.pikorea.co.kr

Physik Instrumente(PI Shanghai) Co., Ltd.
Shanghai
info@pi-china.cn
www.pi-china.cn

USA (West) / Mexico

San Francisco Bay Area Office

PI (Physik Instrumente) L.P.
5420 Trabuco Rd., Suite 100
Irvine, CA 92620
Phone +1 949 679-9191
Fax+1 949 679-9292

PI (Physik Instrumente) L.P.
1 Harbor Drive, Suite 108
Sausalito, CA 94965
Phone +1 408-351-4086
Fax+1 949-679-9292

Headquarters
GERMANY
Physik Instrumente (PI)GmbH & Co. KG
Auf der Roemerstr. 176228 KarlsruhePhone +49 721 4846-0
Fax		 +49 721 4846-1019
info@pi.ws
www.pi.ws

PI miCos GmbHEschbach
info@pimicos.com
www.pi.ws
PI Ceramic GmbHLederhose
info@piceramic.com
www.piceramic.com

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BRO46E PIglide 05/2015.1,0. Subject to changes without notice. © Physik Instrumente (PI) GmbH & Co. KG 2015

MOTION