Motion Systems forElectronics Manufacturing
PLACE  ALIGN  PROCESS  INSPECT  TESTW W W. P I . W SMotion Systems forElectronics Manufacturing
Industry 4.0, internet of things, cloud computing, autonomous driving, electronic
health, augmented reality or artificial intelligence benefit from advanced technology that the semiconductor and electronics industry are currently making available.
At the same time, these growing markets are presenting them with great challenges: Even smaller components with higher functional density, shorter innovation
cycles, and a growing diversity of end products.
Precision, throughput, reliability, and flexibility of production systems is becoming
more decisive at a wafer and chip level not to mention at printed circuit board level.
Each positioning solution for placing, aligning, processing or inspecting components must be able to meet these requirements.
Process type, work cycle, tool types, size of the machining surface, feature size,and criteria such as throughput, precision and geometric tolerances make different
demands on the motion systems.
Many years of experience in the semiconductor market, the technological diversity
and the high vertical range of manufacturing enables PI to react flexibly to themarket development and offer motion systems that address the needs of OEMs,
integrators and end users in the field of electronics manufacturing.

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This brochure contains examples of high-performance systems for different
production steps from standard products to highly customized solutions that
communicate via standard industrial networks.

W W W. P I . W S

Content
Automation Platforms for Placing............. 3
Automation Platforms for Aligning........... 4
Automation Platforms for Processing....... 5
Automation Platforms for Inspecting........ 6
Automation Platforms for Testing............. 7
Engineered Gantry Systems...................... 8
Parallel-Kinematic Systems..................... 10
Rotation Stages......................................... 12
XY Stages.................................................. 14
Tip/Tilt Platform & Objective Scanner.... 17
Linear Stages............................................ 18
Z Stages..................................................... 23
Linear Actuators........................................ 24
Motion Control.......................................... 26
Capabilities of the PI Group..................... 29

A U T O M AT I O N P L AT F O R M S F O R P L A C I N G

Placing Components and Tools
High Accuracy  High Dynamic  Long Travel Ranges

Manufacturers of electronic components are pushing for improved throughput. They can take advantage of the gantry's high speed
but also its high accuracy for pick and placement of components and machining tools in continuous production. Reliable performancewith high operating cycles is also important. PI’s motion platforms meet these requirements and also provide easy connectivity toother automation systems and devices within the production line.

Vertical Axis – Component and Tool Positioning

Key Features of the Gantry DesignnHigh mechanical stabilitynLightweight motion platform/bridge axisnDisturbance rejectionnIndividual travel ranges in XY up to 2 mnncounterbalancenAdditional options for high-performanceballscrews with linear encodersnRisers/lifters to place the vertical axis at

Optimized cable management and operation for
placing vertical motion axes, sensor and electronics
integration, pneumatic lines and optical routing systems

required processing heightnPIMag® linear motors with pneumaticMotion profiles may be rasterbased or a complex contour

Motion Control
The gantry system can be controlled
by an ACS motion control module which has:nnMulti-input multi-output optimization

XY Axis – Workpiece Positioning

for yaw and linear control (MIMO)nBase axis: Dual PIMag® linear motors fornBridge axis optionally with air bearings

Automatic cross-axis tuning for consistenthigh dynamics and high precision >> p. 15

performance over all gantry areasnInput shaping for vibration-free motion and vastly

for demanding straightness and velocity
requirements >> p. 21

improved move and settle times >> p. 26 et seq.

FURTHER SOLUTIONS FOR PLACING

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High speed placing of ICs on test
handler systems >> p. 24

Customised IC component
packaging systems >> p. 9
MOTION|POSITIONING

Fast step and settle XY stages forball grid array placement >> p. 14

A U T O M AT I O N P L AT F O R M S F O R A L I G N I N G

Aligning Fibers and Optical Components
Fast Coupling  High Precision  Scan Routines

Universal adoption of smartphones, cloud computing, streaming media, E-Health and now the Internet of Things, and Industry 4.0 all meanthat more data must be stored, conveyed, and processed at higher speeds and with lower energy consumption. This is driving rapid
integration of photonic devices alongside microelectronics on the same semiconductor wafers. Since testing begins at the wafer level,
photonic techniques have been integrated into wafer probers and other semiconductor test tools. And the chips must be packaged together
with other devices such as lasers and fiber arrays. Many of these manufacturing steps start with fast, non-contact and stable 6-DOF
orientation of photonics elements to nanometer precision, with real-time compensation of drift, and photonic and geometrical variations.

XYZ axis – Nanometer Positioningof Optical Components

Key Features of the Multi-Robot Active
Alignment SystemnnFast algorithms for first light, area scan, and gradientfast scanning motion and dynamic,
real-time compensation of drift>> P-616 NanoCube®, p. 11

search for optimizing multiple elements, channels,
inputs and outputs simultaneouslynParallel-kinematic piezo system forSuitable for any optical figure-of-merit: power,
photon count, MTF score, etc.

nPosition sensors on all axes forhigh accuracy, safety, andreliabilitynOptimization time typicallyless than 1 second

Motion Control
High-performance industrial controllers automate built-in
scans and optimizations in parallel, with millisecond
responsiveness to align the optics>> C-887 / E-712, p. 26 et seq.
SoftwareSupport rapid application development on all common
operating systems such as Windows, Linux, and MacOS
as well as a large number of common programming languages including MATLAB , Python, C# and NI LabVIEW

XYZ/0X0Y0Z – Submicron Automatic
Optimization of Optical Components
Parallel-kinematic hexapod mico-robots
for motion and alignment in six degrees
of freedomn	Freely definable center of rotation
addresses geometrical offsetsn	Brushless DC motors for industrial-class reliability>> H-811, p. 10n	

FURTHER SOLUTIONS FOR ALIGNING

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Stacked multi-axis system for double-sided
alignment of in- and output

Fast automated alignment
routines
W W W. P I . W S

Multi-axis system for single-sided
fiber alignment >> p. 10

A U T O M AT I O N P L AT F O R M S F O R P R O C E S S I N GProcessing Large Printed Circuit Boards
High Precision  High Throughput  Simultaneous Multidimensional Processing

Processing high-density structures over large areas such as laser drilling or laser marking of PCBs requires solutions which provide high precisionand high velocities. A possibility to address the needs of industrial production is the coordination of multi-axis positioning systems with a highdynamic galvanometer scanner. PI’s simultaneous control of the XY stages and the excelliSCAN galvanometer scan system combined as XL
SCAN allows continuous operation over large areas avoiding idle time and eliminating stitching errors. The ability of extending the field of viewby the travel ranges of the stages has the advantage that the optics can be fixed and maintained in terms of accuracy, spot size and performance.

Key Features of the XL SCAN
Automation Solution

Galvanometer Axis – Fast Laser PositioningnExtra large field of viewn

Increased throughput (up to 41 %)from SCANLAB with two galvanometerscanner axes for beam controlnIncreased processing accuracynElimination of the potentialnFast and precise excelliSCAN scan system

discontinuities caused by tilingor stitching multiple fields ofview of the scan headnSmooth processing
with high dynamics andno stage vibrations

XY Axis – Workpiece Positioningn

Motion Control

PIMag® linear motors for high precision

Class leading digital scanner technology with
EtherCAT® based industrial networking.

and high velocity >> V-551, p. 19nLinear guides with crossed roller bearingsnXY drag chain cable managementnGranite base for optimized system accuracy

A patent pending coordination of SCANLAB's
scan head control with the linear stages
managed by an ACS motion control system.

FURTHER SOLUTIONS FOR PROCESSING

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Air bearing systems for
wafer dicing >> p. 13

XY stages for laser processing >> p. 18
MOTION|POSITIONING

Granite-based systems for large area
panel processing >> p. 15

A U T O M AT I O N P L AT F O R M S F O R I N S P E C T I N G

Inspecting Complex Structures
Compact Design  High Stiffness  Multiple Degrees of Freedom

Electronic devices may be found on many complex structures such as concave or convex 3-D geometries. With the increase of
3-D printing and laser direct structuring, inspection of smartphone antennas, molded interconnects, wearable, and medical implants
plus sensors have become widespread. The ability for rapid point-to-point inspection of components in such devices in a 24/7
environment is becoming more challenging. Hexapods are now being widely used for continuous scanning of surfaces in industries
producing high-end optics, camera modules and automobile vision systems.

Key Features of HexapodsnThree linear axes, three rotational axesnHigh stiffnessnLow moving mass, low inertianExcellent dynamic behavior,
fast step-and-settlenMinimized axis crosstalk motionnExcellent repeatabilitynSmall installation spacenLarge central aperturen

XYZ/0X0Y0Z – Workpieceor Tool Positioning
Multiple degrees of freedomn	Freely definable center of rotationof workpiece or inspection devicen	No moving cables

Scanning of complex structuresn	

Ideal for spherical and asphericalshapes and freeforms such as opticsn	

Motion ControlnPosition input via Cartesian
coordinatesnCoordinate transformation
handled by the controllernReference system (work, tool)
can be quickly and easily changednSupport of motor brakes andabsolute-measuring sensors
with BiSS interfacenEasy integration in automation
processes via industrial
EtherCAT® interface >> p. 26 et seq.

Have a look at the systems in motion on the
PI YouTube channel www.youtube.com/user/phyinst

FURTHER SOLUTIONS FOR INSPECTION

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R-Theta system for wafer scanningsurface inspection >> p. 21

Autofocus inspection foranalyzing defects >> p. 17
W W W. P I . W S

Large aperture XY stage fordouble-sided PCB inspection >> p. 14

A U T O M AT I O N P L AT F O R M S F O R T E S T I N G

Tactile and Optical Testing of Electronic Devices
High Repeatability  Force Control  Various Angles

Electronic systems are becoming smaller, more complex, operate in different environments and include several types of devices that
require tactile, optical, and electronic testing methods. The position of these devices in the final assembly demands precise positioningof the inspection tool in several degrees of freedom. PI offers powerful motion systems for various test methods that can be integrated
into customer production lines while maintaining capacity and throughput.

Vertical Axis – Positioning of Testing Device

Key Features of PI's Motion SystemsnnnBall screw linear motor or voice coil stage

to design most advanced solutionsnCable management integration

EtherCAT® communication for fastn

Holding brake or counterbalancenDirect-measuring linear encoder

Unique range of motion technologies

and coordinated motion ensuring
the highest throughputn>> M-511, p. 20

EtherCAT® connectivity for the integrationof third-party sensors and test devices directly
into the subsystem and into the external PLC
or automation controller

Hexapod Axis – Sensor Positioningat Various Angles

Secondary Vertical Axis –Force Control of Measuring SensornPIMag® voice coil linear actuatornForce sensor with 1 mNnParallel-kinematic hexapodnSix degrees of freedomnFreely definable center of rotation>> H-811, p. 10

resolutionnWeight force
compensation>> V-275, p. 24

XY Axis – Workpiece Positioning

Motion Control
EtherCAT® control and synchronizationof all axis types. External PLC
control possible >> p. 26 et seq.

n

PIMag® linear motors for high precisionnXY drag chain cable management

and high velocity >> V-551, p. 19

FURTHER SOLUTIONS FOR TESTING

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Inertial sensor testing – accelerometers,
inclinometers & gyroscopes >> p. 12

Force sensor for haptic testingof devices >> p. 24
MOTION|POSITIONING

XY piezo system
for ASICs testing >> p. 16

ENGINEERED GANTRY SYSTEMSEngineered Gantries and Granite-Based Systems
Highly Dynamic – High Mechanical Stability – Customized Integration

Engineering designs of motion subsystems have been a part of PI's core business for many years. Customized solutions, fitting
seamlessly into existing processes, advance automation in manufacturing and inspection processes.

Core Competencies
nGantry designs and other granite-based subsystems provide
solutions for all steps of the manufacturing process fromdevice or tool placement to final inspection and testing.
Solutions may offer the ability to carry out multiple phases ofthe manufacturing cycle. PI can pull on its extensive expertisein engineering design to offer mechanical bearing, air bearing,and hybrid solutions. Extensive use of linear motor technology
coupled with advanced motion control algorithms optimizes
speed, step-and-settle profiles, and stability.

Support and consulting for motion
and positioning applicationsnEconomic designnComplex multi-axis designs and parallel
kinematic roboticsnBroad spectrum of in-house technologies:
Drive, guide, and sensor technologiesnIn-house development of motion control
electronics and software platformnSoftware support with libraries and driversnCommissioning

Mechanical Bearing Gantry System with Optional Z Axis
Applications: Stencil cutting · Pick-and-place ·Processing · Micromachining · Alignment andinspection · Laser direct imaging
System features: Micron-level precision · Highthroughput · Ability to maintain the highest
performance and stability over large XYZ areas

Planar Air Bearing with Additional
Air Bearing Rotation Axis
Applications: Flat panel processing · Laser scribing ·Wafer dicing and inspection
System features: Highest level of flatness, straightness
and orthogonality · Integrated granite surface

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W W W. P I . W SMechanical Bearing with Twin Cross-Axis
and Multi Technology Ancillary Axis
Applications: Alignment and packaging
System features: Multiple tool heads provide flexibility
and throughput, allowing numerous nests or stations tobe operated concurrently

Long Linear Travel on a Split-Bridge
Granite Arrangement
Applications: Alignment and packaging
System features: Substrate feeder and component
carrier · Fast repeatable motion · Head provides
4 simultaneous placements · Hollow shaft allows
vacuum feed-through for component gripper

Hybrid Bearing Design with Air Bearing Scan
Axis and Ball Bearing Step Axis
Applications: Wafer inspection and processing · 3-D printing
System features: Fast step axis with additional pitch
stiffness of mechanical bearing · High degree of velocity,
flatness, and straightness on scanning cross axis

Have a look at further engineered subsystems on the PI website www.pi.ws

MOTION|POSITIONING

9PA R A L L E L - K I N E M AT I C S Y S T E M S

Parallel-Kinematic Hexapods
High Stiffness – Free Definable Pivot Point – Compact Designn	Travel ranges to ±17 mm / ±21°n	Load capacity to 5 kgn	
Repeatability to ±0.06 µmn	
Velocity to 20 mm/sn	Superior lifetime

H-811.I2

Applications: Inspection and testing of aspherical or spherical surfaces · Alignmentof components and camera lenses · Sensor testing · Limited installation space
System features: High stiffness · Multi degrees of freedom · Compact design
Low abbe error · Submicron precisionnLoad capacity to 30 kgnTravel ranges to ±50 mm / ±30°nRepeatability to ±0.1 µmnVelocity to 60 mm/sn

BLDC motors and variants with absolute encodersnWorks in any orientation

H-840

Technology: Parallel-Kinematic Hexapods

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In a parallel-kinematic hexapod all drives act on a single moving platform, which
results in a much more compact design than possible with stacked systems. Compared to a serial robot, hexapods show a much better ratio of payload to operating
weight. As only one platform is moved, the overall moved mass is lower resulting
in higher dynamics in all motion axes. Serial motion and positioning platforms
have their advantages in the high modularity which allows for individual designof each moving axes. Motion control, especially the homing procedure, is simpler
with no coordinate transformation required. On the other hand, the combined
positioning errors of stacked systems affect the attainable overall system accuracy.
Hexapods can have an improved path accuracy, higher repeatability and flatnessof travel.

W W W. P I . W SParallel-Kinematic Multi-Axis Systems
High Stiffness – High Frequencies – Compact Design

Applications: Aligning and positioning of small devices in very fine scale andwith high frequency · Fast Scanning
System features: Compact design for space-critical applications · High stiffness forhigh frequency adjustments · Superior multi-axis subnanometer performance in XYZnParallel-kinematic XYZ piezo systemnTravel range 100 µmnHigh resonant frequenciesnResolution to 0.3 nm

nHigh guiding accuracy due to zero-play flexure guidesnID chip functionality for fast auto-calibrationnOutstanding lifetime due to PICMA® piezo actuators >> p. 25

P-616 NanoCube®

Applications: Mask and wafer alignment · Inspection · Surface measurement by AFM
System features: High tracking accuracy · Fast scanning · Excellent flatness · Nanometer precision ·Fast response times · Multiple degrees of freedomnParallel-kinematic 6-axis piezo systemnTravel ranges to 200 µm linear and to 1 mrad tip/tilt anglenClear aperture 66 mm x 66 mm

nHighest linearity due to capacitive sensors

nHigh guiding accuracy due to zero-play flexure guidesnExcellent scanning flatnessnUHV-compatible to 10-9 hPa

P-562.6CD PIMars

From Standard to Custom Products
PI offers different solutions for applications requiring multi-axis precision alignment based on serial kinematics (stacked axis), parallel
kinematics (e.g. hexapods), and hybrid kinematics (SpaceFab), which
comprise 3 sets of stacked xy stages combined to a 6-DOF kinematics.
Generally, PI technologies can be combined to a customized SpaceFab, fulfilling the customer’s requirements on travel and precision.
The use of linear motor technology with absolute encoders with 1nm
resolution enabled PI to combine the speed and reliability requiredfor high productivity in electronics assembly and component alignment, as well as for higher accuracy for dense packaging of the smallest components. Long travel in x and y as well as optimized flatness
for applications requiring multiple-axis precision alignment can beachieved easily by SpaceFab hybrid kinematics.

MOTION|POSITIONING

Hybrid SpaceFab for electronics
assembly and alignment of components

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R O TAT I O N S TA G E S

Precision Rotation Stages
High Rotational Accuracy – Direct Position Measurement – Aperture

Applications: Micromanipulation · Alignment of optical components and gimbals
System features: High speed and high accuracy · Very low profile allows placementin space constrained areas · High torque to size ratio · Direct drive and direct position
measurement · Keeps position at power off · Low noise emission

U-651

n

	
PILine® ultrasonic piezomotorn	
Low profile of only 14 mmn	Unlimited rotation range >360°n	Drive torque to 0.3 Nm in both directions of rotationn	Self-locking when switched off: Saves energy
and reduces generation of heat

Applications: Alignment and testing of devices such as accelerometers, inclinometers and gyroscopes
System features: Low speed angular motion · Direct measuring capability to increase table
top position accuracy · Aperture for component placement and access from underneath deliverynUnlimited travel rangenRepeatability to 0.5 μradn

Load capacity to 50 kgnOption: Direct position measuring

PRS-200

with angle-measuring systemnRotation range 90°nRepeatability to 2.7 μradn

Load capacity to 8 kgnOption: Direct position measuringwith angle-measuring system

WT-90

From Standard to Custom Products

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Commercially available torque motors offer very high torque but only limited apertures. This customized PIMag® torque motor has a particularly large aperture andoffers high dynamics and stability. It requires minimal installation space, for example it can be integrated on top of a PI hexapod without vastly increasing overall height.

W W W. P I . W SHigh-Precision Air Bearing Rotation Stages
Exceptional Velocity Control – High Placement Accuracy – AperturenUnlimited travel rangenHigh load capacitynTable top diameters from 50 to 300 mmnBidirectional repeatability ± 4 µradn

Clear aperturenOptional absolute encodernSlip ring optionsnCleanroom compatible

A-62x series

Applications: High-precision alignment and calibration of sensors · Wafer inspection
Metrology applications · X-ray diffraction systems
System features: High accuracy of position even during multi-axis contouring · Low profile andweight to reduce errors associated with working height · Elimination of cogging for smooth velocity
control · Direct measurement at table top position · Aperture for component placement or beam deliverynXY air bearing stage >> A-311, p.15

nAir bearing rotation stage >> A-623

nAir bearings on all axesn

Full-load support over complete XY travel rangenHigh system repeatability and flatnessnDrag chain cable management includednMetrology provided at wafer work point

Stacked system configured from standard
products for surface inspection and wafer dicing

From Standard to Custom Products
For measuring thickness and flatness of wafers a customer required a rotation stage with very smooth motion
and low error motion (runout and wobble). Also, there
should be an access to both the top and bottom surfacesof the wafer. PI were able to take their experience andcreate a design with a very large aperture relative toouter diameter, whilst maintaining the original importantcharacteristics of an air bearing rotation stage.

MOTION

n
n
n
n
n

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 lear aperture with 260 mm diameterC adial/Axial error motion < 100 nm
RNon contact and frictionlessMax. velocity to 3.000 °/s
Cleanroom compatible

POSITIONING13

XY STAGESHigh-Precision XY Linear Motor Stages
High Precision Scanning – Exceptionel Geometric Precision – High Accuracy

Applications: Alignment and inspection of wafers and PCBs · High precision metrology applications ·LED wafer processing · Applications where straightness and flatness of motion is critical
System features: High-precision contouring or raster scanning · Nanometer
resolution · Aperture versions for processing from top and bottom and feed throughnTravel range 102 mm × 102 mm (4")

nLarge aperture, 150 mm × 150 mmnBidirectional repeatability to ±0.25 µmnVelocity to 500 mm/sn

PIMag® linear motor >> p. 15nHigh-resolution incremental linear encoder
V-738*

V-731 · V-741*nTravel range 205 mm × 205 mm (8”), 305 mm x 305 mmnBidirectional repeatability to ±0.25 µmnVelocity to 200 mm/snIncremental linear encoder with 1 nm resolutionnPIMag® linear motor >> p. 15nCrossed roller guides, anti-creep* Also available with stepper motor or DC motor

From Standard to Custom Products
All essential technologies required for the drive or
motor, the measuring system, the motion controller,
and the guiding system, are available in-house at PI. To
serve custom requirement, in-house development andthe production capabilities of PIMag® magnetic drive
technologies can be utilized.
Here is an example of a modified XY stage with PIMag®
linear motors. The customer required shorter processing
times, higher precision at high duty cycles, and improved accuracy while adding a higher mass workpiece. In
order to achieve these requirements, a new stage wasdeveloped based on the experience with PI standard
stages such as the V-741. The new stage is designed withincreased power ironless linear motors to offer higher
accelerations and lower heating.

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The newly designed body of the stage is more rigid providing higher stiffness, improved straightness and flatness with the use of higher loads. In addition the use ofan absolute encoder enables the customer, to simplify
startup and improve throughput of the machine.

n
n
n
n
n
n

 ravel range 305 mm x 305 mm (12“x12“)T ax. velocity 1000 mm/sec
M
Load capacity up to 30 kg
Absolute optical encoderEncoder with BiSS C communication
ACS Motion Controller >> p. 26 et seq

W W W. P I . W S

Ultra-High Precision XY Air Bearing Stages
High Precision Scanning – Exceptional Flatness – High Accuracy

Applications: Wafer inspection and processing · Laser micromachining and laser ablation where ultimate
precision with long-term repeatable processing is required · Scanning applications · Demanding metrology
System features: Exceptional flatness, straightness and orthogonality for correct feature shapes andtwo-dimensional placement · Outstanding velocity regulation for scanning and constant velocity tasksnTravel ranges to 200 mm × 200 mmnLoad capacity to 147 NnLow profilenBidirectional repeatability ±0.1 µm

nAir Bearings >> p. 21nOptional granite base platesnCleanroom compatible
A-311

Applications: Flat panel processing · Laser scribing · Wafer dicing · Thin film pattering
System features: Highest level of flatness, straightness and orthogonality

A-322

n

Travel ranges to 500 mm × 1000 mmnLoad capacity to 245 NnBidirectional repeatability ±0.08 µm

nAir Bearings >> p. 21nVelocity up to 2 m/snCleanroom compatible

Technology: PIMag® Linear Motors
Magnetic direct drives from PI provide a direct and stiff connection between the load tobe moved and the drive. The industry demand is particularly high when objects need to
be positioned with high dynamics and precision. In conjunction with the smooth-running
precision air bearings, these types of linear systems are particularly suitable for applica­
tions that require constant-velocity scanning. The drives operate without mechanical contact and therefore are very reliable. PIMag® linear motors are the result of in-house development. In this way, specific properties of the stages can be influenced directly.

MOTION|POSITIONING

0

10

20

30

40

50 mm

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XY STAGESHigh-Precision XY Piezo-Based Stages
Fast Scanning – Direct Position Measurement – High Accuracy

Applications: High-speed alignment of optical components · Dynamic correction of systemerrors · Fast surface scanning of sensors
System features: Fast motion with nanometer precision · Excellent linearity · Low position noisenPIHera piezo systemnTravel ranges 50 to 1800 µmnRepeatability to ±2 nmnPositioning accuracy 0.02 %n

Direct metrology with capacitive sensorsnOutstanding lifetime due to PICMA® piezo actuators >> p.25

P-620

Applications: Fast and precise scanning and stitching for microscopy applications
System features: Nanometer precision · High Dynamic · Self-locking
on power off · Low profile · Low noisenPILine® ultrasonic piezomotornHigh velocity constancy at 10 μm/sn

Velocity to 120 mm/sn

Bidirectional repeatability ± 0.3 μmnTravel range to 135 mm × 85 mm

nCompact, flat design: Unrestricted access to the sample

U-780

From Standard to Customization:
Active Alignment of Optical Interfaces
The maximum performance of PI precision systems is achieved through comprehensive design and analysis know-how
using proprietary techniques and proprietary devices developed in-house. The image shows a customized piezo-based
XY stage for a HVM (High Volume Manufacturing) test
assembly for ASICs (Application Specific Integrated Circuits).
The test platform is part of an IC pick-and-place handler
machine. The micrometer accurate positioning system aligns
the optical interface and the DuT (Chip under Test). It enables
scanning of more than 100 µm in x and y direction on thechip in less than 1s. Path trajectory and scan area can be
adjusted according to the individual DuT.

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The XY system is retrofitted into the existing pick-and-placechange KIT and is equipped with a mechanical device to fix
the optical interface and an aperture for chip handling using
the existing vacuum suction.

n
n
n
n
n
n

 10 µm travel range in x- and y-direction1
 canning in open-loop with signal threshold detection
SFrictionless, high-precision flexure guiding systemTemperature compensatedIndividual optical mountings
 therCAT® controller >> E-727, p.26 et seq.
E

W W W. P I . W S

T I P / T I LT P L AT F O R M & O B J E C T I V E S C A N N E R

Tip/Tilt Platform and Objective ScannerHigh Dynamic – High Guiding Accuracy – Outstanding Lifetime

Applications: High-speed laser deflection · Beam alignment and positioning on very fine scale
System features: Compact design for space critical applications · High stiffness for high frequency
adjustments · Self locking · Superior multi-axis subnanometer performancenParallel-kinematic tip/tilt platformnTip/tilt angle up to 5 mrad, optical deflection
angle up to 10 mrad (0.57°)nHigh resonant frequencies for dynamic motion
and fast step-and-settlenPosition sensors for high linearitynOutstanding lifetime due to

S-331

PICMA® piezo actuators >> p. 25

Applications: Surface profilometry (wafer lapping and polishing) · High-resolution imaging(semiconductor, MEM, and LED devices) · Auto-focusing · Scanning interferometry (thin films) ·Confocal scanning (wafer bump and through-silicon via) · Laser machining optics
System features: Focusing and Z-stack scanning · Zero-play · Fast step-and-settle operation · Sub-nm resolution

P-725 PIFOC®

nPIFOC® objective scannernTravel ranges to 460 µmnSettling times in the range of millisecondsnFine positioning of objectives with sub-nm resolutionnHighest linearity due to capacitive sensorsnZero-play, high-precision flexure guide systemnOutstanding lifetime due to PICMA® piezo actuators >> p. 25

From Standard to Custom Products: Autofocus System
Autofocus systems with PIMag® voice coil drive are used in
the automated inspection for analyzing defects and reviewing
dimensions of wafers. The autofocus system is used to map
the wafer surface, which is then passed to the inspection
system to automatically adjust the focus during the inspection
process. PI not only provides the voice coil stage but also thetools and application support to correctly align the customer’s
objective lens with the direction of travel thus ensuring total
system performance.

MOTION|POSITIONING

17

LINEAR STAGES

Precision Linear Motor and Ball Screw Stages
High Load – Long Travel Ranges – Cost Efficient

Applications: Processing, alignment and metrology applications in industrial environment
System features: Single-axis, XY and Z configurations · High repeatable accuracy ·Long-term performance · Vertical positioning of loads · Medium Speeds · Robust buildnTravel range to 813 mmnVelocity to 300 mm/snSynchronous servo motornPrecision recirculating ball bearings,
load capacity to 400 N, to 450 NnSide seal and air purgenOptional holding brakenOptional linear encoder to improve repeatability and accuracy

L-412 · L-417

Applications: High industrial performance · Reliable tasks for processing, alignment
and metrology applications · High-speed die bonding
System features: Single-axis and XY configurations · High accuracy · High velocities ·Long-term performance

V-412 · V-417

nTravel ranges to 813 mmnHigh nominal force 33 N, 87 Nn

Velocity to 2000 mm/sn

PIMag® linear motor >> p.15n

Precision recirculating ball bearings,
load capacity to 400 N, to 450 N

18nSide seal and air purgenDrag chain cable management

XY configurationof the V-417

W W W. P I . W SHigh-Precision Piezo-Based and Linear Motor Stages
High Accuracy – High Dynamic – Flexible Configuration

Applications: Micromanipulation · Automated alignment of optical components or samples ·Applications with limited space
System features: Single-axis, XY and Z configurations · Self-locking on power off · Fast motion
with nanometer precision · High force to size ratio · Low noise emissionn

PILine® ultrasonic piezomotornVelocity to 200 mm/snHigh guiding accuracynBidirectional repeatability ±0,2 µmnSelf-locking, no heat generation at restn

Low-noise operation

U-523

Applications: Ultrafast micromachining and nanofabrication · Rapid part and toolalignments · Metrology and scanning
System features: Fast and precise scanning · Compact design · Nanometer precision ·Excellent geometric performance · Outstanding velocity control

V-522 · V-524 · V-528

nPIMag® linear motor >> p. 15nTravel ranges to 230 mmnVelocity to 0.5m/s

nBidirectional repeatability ±0.05 µmnHigh guiding accuracynCrossed roller guide, anti creepnHighest precision with >> PIOne linear encodernPIMag® voice coil with direct positioning measuringnTravel ranges 5 mm, 10 mm, 20 mmnMax. velocity 250 mm/sn

Bidirectional repeatability ±120 nmnScanning frequencies of more than 10 HznCrossed roller bearings, anti creep

V-551

Technology: PIOne Linear Encoder
The high-resolution PIOne encoder was developed by PI and, with corresponding
processing of the measured values, allows a position resolution considerable lessthan one nanometer. The optical and noncontact PIOne encoders are based on aninterferometric measuring principle. Due to the short signal period and the highquality of the signals, the linearity error of PIOne encoders is less than 1 %. PIOne
encoders support direction sensing when evaluating a reference signal. A V-551.4D
with PIOne linear encoder performs a sequence of 0.5-nm steps.

MOTION|POSITIONING

19

LINEAR STAGESHigh-Precision Ball Screw Stages
High Travel Accuracy – Compact Design – Cost Efficient

Applications: General purpose · Processing of heavy loads
System features: High precision at medium travel ranges and low speed ·Z-axis configurations · Low profilenTravel ranges 102, 204, and 306 mm (4”, 8”, 12”)nMax. velocity to 100 mm/sn

Bidirectional repeatability ±0.2 µm

nLoad capacity to 100 kgnZero-play ball screwnXY and XYZ configurations

M-511 · M-521 · M-531

Applications: General purpose · Processing of substrates · Verticaland horizontal tool, camera, or sensor centering · Die bonding
System features: High precision at medium travel ranges andlow speed · Stiff · Resistant to jitter

L-408

n

Travel range 25 mmnStepper motor, DC or DC gear motornPrecision sliding-thread spindlenCrossed roller guides for high load capacityand precision, anti-creepnIntegrated optical limit switchesnOptical reference point switch with direction sensingnTravel ranges to 155 mm (6”)

nBidirectional repeatability to ± 0.1 μmnActiveDrive DC, DC, BLDC, and DC gear motorsnStepper motorsnOptional linear encoder for direct position measurementnDirection-sensing reference point switch

L-509

L-511

20

Stacked systems configured from standard products

W W W. P I . W S

Ultra-High Precision Linear Air Bearing Stages
High Guiding Accuracy – Exceptional Velocity Control – Long Travel Ranges

Applications: Inspection and processing of wafers and flat panels · Scanning ·Laser scribing and drilling · 24/7 operation · Metrology
System features: Highest flatness, straightness, velocity and precision · Split bridge
arrangements · Long-term performance · Cleanroom compatible

A-110

n

Size of the motion platform 160 mm × 200 mmnTravel ranges to 400 mmnBidirectional repeatability to ± 0.25 µmnLoad capacity to 100 NnNoncontact and friction-free motionnMagnetically preloaded >> air bearingsnCleanroom compatiblenSize of the motion platform 210 mm × 210 mmnTravel ranges 50 mm to 750 mmnBidirectional repeatability ±0.1 µmnNoncontact and friction-free motionnPreloaded >> air bearingsnCleanroom compatible

A-123

n

Size of the motion platform 57 mm × 93 mmnBidirectional repeatability ±0.1 µm

nLoad capacity to 3 kgn

Velocity to 0.25 m/secnAcceleration to 3.5 m/s²nCleanroom compatible

A-141

Technology: PIglide Air Bearing
The PIglide air bearing technology allows friction-free positioning with exceptional on axis error motion accuracy of up to 5 μrad
over 100 mm. The technology provides high in position stability and constant velocity scanning. Air bearings have straightness andflatness characteristics that are superior to mechanical bearing solutions.

MOTION|POSITIONING

21

LINEAR STAGESHigh-Precision Compact Linear Stages
Very Compact Design – Cost Efficient – Flexible Configurations

Applications: Positioning of workpieces or optics
System features: High repeatable accuracy · Short travel ranges · Compact designnTravel ranges 13 or 26 mmnStepper motor or DC servo motor withand without gearheadnVelocity to 15 mm/sn

Bidirectional repeatability to ± 0.15 µmnLoad capacity to 30 N

L-505

n

Travel range 25 mmnIntegrated linear encoder option
for highest accuracy with 0.1 μm resolutionnUnidirectional repeatability 0.15 µmnMax. velocity 20 mm/snBall screw for high velocities and number of cycles

F-122

22

M-122

n

Long travel ranges to 25 mm respectively 10°nMaximum velocity of 20 mm/s respectively 15°/snUnidirectional repeatability XYZ 0.3 µmnAngle optimization by goniometernSafety due to integrated sensor technology

Stacked system configured from standard products
for testing and packaging on chip level

W W W. P I . W S

Z STAGES

Precision Z Stages
High Loads – High Stability – Highly Practical

Applications: Vertical part motion · Fine focus adjustments
System features: Unobstructed access to the table top from any directionnCompact design: Surface 63 mm × 63 mmnStepper motors and closed-loop DC motorsnOptional linear encoder for direct position measurementnCrossed roller guides, anti-creepnNoncontact reference and limit switches

L-306

UPL-120n

Travel range 13 mm (1/2")nUnidirectional repeatability to 0.05 µm

nLoad capacity to 20 kgnIntegrated optical limit switchesnAvailable with direct-measuring encodernCrossed roller guide, anti-creep

Online Product Finder

In addition to the brochure you can take advantage of the product finder on the PI website. It allows searching for a suitable automation
solution specified by the axes of motion required.

Try out at www.pi-product-finder.com

MOTION|POSITIONING

23

L I N E A R A C T U AT O R S

Precision Voice Coil Linear Actuators
High Dynamic – High Velocity – Force Control

Applications: High speed placing of integrated circuits on turret-based test and finish handlers, chip shooter
System features: High speed and accurate motion · Compact designn	Travel range 1.5 mmn	High scanning frequencies, fast step-and-settlen	Integrated linear encoder with 0.1 μm resolutionn	Compact dimensionsn	OEM linear actuator

V-900KPICnTravel ranges to 20 mmnVelocity to 100 mm/snIntegrated linear encoder, 0.01 μm resolutionnOptional force sensor with 1 mN resolution

V-273

Applications: Haptic and touch screen testing · High speed device placement ·Pressure and tension control
System features: Precise positioning and force feedback · Contour following based onforce rather than displacement sensor · Dual feedback capablenPush force up to 10 Nn

Velocity to 600 mm/snIntegrated linear encoder, 0.01 μm resolutionnWeight force compensationnOptional force sensor with 1 mN resolution

V-275

Technology: Position and Force Control

24

Force regulation allows the operation of PIMag® drives and stages with defined
holding or push/pull forces. The force and position sensors can be read individually or simultaneously in a dual control loop. The motor can not only operate in pureforce control, it also maintains the ability to control both position and velocity. An
auto-zero function defines the holding current at which the drive outputs an openloop force of 0 N, i. e., for compensating weight.

W W W. P I . W S

Precision Screw-Drive and Piezo Linear Actuators
High Dynamic – High Resolution – High-Load

Applications: Aligning PCBs to masks · Micro jetting · High precision and low volume dispensing e.g.
solder balls or solder paste · Component assembly
System features: Ability to move tiny distances to displace material (liquid or physical) ·High repeatability · High forces · Compact designnForces up to 125 NnTravel ranges 13 to 77 mm (.” to 3”)nDC or stepper motornNonrotating tipnVacuum-compatible versions to 10–9 hPa on request

L-220

L-239

n

High feed force to 300 NnTravel range 52 mm (2”)

nMinimum incremental motion 0.1 μmnVelocity to 50 mm/snPreloaded, low-friction ball screwnVacuum-compatible versions to 10–9 hPa on requestnStepper, DC and BLDC motors

P-602

n

Travel ranges to 1 mmn

Forces to 100 NnFlexure guidesnStiff and backlash-free constructionnIdeal OEM actuatornOutstanding lifetime due to >> PICMA®piezo actuators

Technology: PICMA® Multilayer Piezo Actuators
PICMA® actuators take advantage of the indirect piezoelectric effect and achieve highforces. They only need a small amount of installation space. At the same time, the
PICMA® actuators are very dynamic and can reach a position with an unprecedented
precision. Due to their ceramic insulation, PICMA® actuators exhibit high reliability andclimate resistance. After several billion cycles no signs of wear in performance wereobserved.

MOTION|POSITIONING

25

MOTION CONTROL

Industrial Motion Control
High Performance – EtherCAT® Communication – Highly Modular

Ethernet TCP/IP

Key Features of the Control SolutionsnModular hardware designnEtherCAT®-based communicationsnOpen architecture for third party EtherCAT®

nUniversal support of multiple motor and feedback typesnFunctional safety drive inputs

nInput shaping for vibration-free motionnExtensive trigger functionalityn1, 2, and 3- axis dynamic error compensationnYaw compensation for gantry solutionsn

HMI for CNC user operationsn.NET library support for windows based applicationsn

MATLAB library

The EtherCAT®-based ACS motion controllers, drive modules, and drive interfaces are ideally suited for multi-axis
synchronized motion applications with the capability tosynchronized motion to >> ‘Position – Event – Generation’(PEG) – to control inspection tools or probes and record
data. The advanced technology and highly modular systemarchitecture of ACS ensures that the most demanding andcomplex applications are managed.

Modular Controller Architecture
ACS control distributed architecture is built of three tiers: The first tier is the host PC user interface which the motion systemcommunicates with. The second tier consists of an EtherCAT®-based motion controller. The motion controller is responsible
for communication with the host software and also manages profile generation real-time programs, diagnostics, and otherhigh level functions. The third tier consists of Universal Drive Modules (and possibly other EtherCAT-based devices), whichin­clude a digital servo processor. It performs the real-time servo calculations. The drive modules power and actuate themotors, read the feedback devices, manage the I/Os, and provide closed-loop positioning control.
A Control Module combines a motion controller and a Universal Drive Module to provide a single box controller & drives solution>> p. 27.

Interface: PEG – Postion Event Generation

26

ACS controllers are capable to create pulses based on exact feedback positions. Position-Event-Generator (PEG) allows high speed
position based outputs with under 100ns delay. These events can be used to trigger an external device, for example a laser, camera
or inspection probe.

W W W. P I . W S

EtherCAT® Motion Controller

Combined Control
and Drive Module

SPiiPlusEC Powerful Motion
Controller and EtherCAT®
Network Manager
up to 64 axes and thousands of I/O’s

SPiiPlusCMhp/ba 32-Axis EtherCAT®
Master Control Module with
3 Built-in Drives
1 to 3 drives, 85 – 265 V-AC, up to 15/30 A

SPiiPlusES High Performance
Multi-Axis Controller with Built-in
EtherCAT®-to-EtherCAT® Bridge
up to 64 axes and thousands of I/O’s

Universal Drive Modules

NPMpm EtherCAT® Single/Dual
Axis NanoPWM Drive Module
1, 2 drives, 12 – 100 V, up to
13.3/40 A

UDMpm EtherCAT® Single/
Dual Axis Drive Module
1, 2 drives, 85 – 265 V,
up to 7.5/15 A

UDMsd EtherCAT® Dual/
Quad Axis Drive Module
2, 4 drives, 12 – 48 V,
up to 2.5/5 A

UDMpa EtherCAT® Single/
Dual Axis Drive Module
1, 2 drives, up to 100 V,
13.3/40 A

Integrated Motion Controller Solutionn4, 6 or 8 motion axesn

Fully integrated closed-loop servo control,
amplifier module, and power suppliesnQuiet PWM drivesnEncoder inputs support sine/cosine and BiSS-C

nFor voice coil drives, DC motors and brushless 3-phase motors

The A-82x motion controller series offers a fully integrated electronics solution with controller, drives, and power supplies in acompact 4-U-high 19-inch rack unit. The A-82x motion controller features the state of the art ACS SPiiPlusEC motion controller andEtherCAT® master.

Find more ACS motion controller and drive solutions on the PI website www.pi.ws

Technology: NanoPWM™
Recent developments in PWM technology have produced NanoPWM™ amplifiers. These offer ‘linear’ amplifier performance but
without the limitations commonly associated with such amplification. The drawbacks of linear amplifiers are: heat generation,
physically larger units, robustness of the electrical device, cost and the ability to deliver high powers when compared to PWM units.
NanoPWM™ amplifiers like linear amplifiers have improved velocity and tracking control, an ability to optimize the use of highresolution feedback, and in-position stability is superior.

MOTION|POSITIONING

27

MOTION CONTROL

Industrial Motion Control
High Performance – EtherCAT® Communication – Force Control

Digital Controller for HexapodsnEtherCAT® fieldbus interface or control via TCP/IP and RS-232nPosition input via Cartesian coordinates, coordinatetransformation handled by the controllernTo simplify integration of the hexapod, the reference system(Work, Tool) can be quickly and easily changednSupports incremental and absolute encoder typesnSeparate control and bus voltage supplynExtensive scan routines for automatic and active alignmentnLabVIEW support

C-887.53x

Digital Controller for Piezo Nanopositioning Systems
EtherCAT® fieldbus interface or control via TCP/IP and RS-232n	

Behaves like an intelligent multi-axis drive system
for up to 3 axesn	Supports strain gauge sensors, capacitive sensors
or piezoresistive sensorsn	

Output voltage -30 to +130 Vn	Extensive software support, LabVIEW, dynamic libraries
for Windows and Linuxn	

E-727.xF

PIMag® Motion Controller with Force, Position,
and Velocity Controln1 or 2 motor channelsnUp to 4 sensor channels for 2 force
and 2 position sensors eachnDepending on version, TCP/IP or USB
interface for configuration and commandingnDepending on version, real-time SPI interface
for sending commands

n

C-413

Digital inputs and outputs, optional
analog inputs and outputsnAuto zero function for holding current
Digital Piezo Controller for up to 6 Axesn

Up to 50 kHz servo update ratenHighly stable 20-bit D/A converternReal-time operating system for excellent trajectory controlnAutoloading of calibration data from stage ID chipfor interchangeability of controller and mechanicsnFlexible interfaces: TCP/IP, USB, RS-232; optional
broadband analog inputs and outputsnExtensive software package

E-712

28

Find more controller and drive solutions on the PI website www.pi.ws

W W W. P I . W S

CAPABILITIES OF THE PI GROUP

Manufacturing in Cleanrooms
Quality according to ISO 14644-1

Available Cleanrooms
PI in Karlsruhe, Germany
PI Karlsruhe is the largest production und development site in the PI Group. Standard andcustom products, mainly in the field of piezobased positioning systems and hexapods, areassembled and qualified here. All areas forseries production, including incoming goods
inspection, are cleanrooms according to the
ISO 8 classification. In addition, some of thesecleanrooms contain ultraclean workplaces
according to the ISO 5 classification. The
Special Products Fractal has rooms classified
accord­ing to ISO 7 and ISO 8 as well as ultraclean workplaces according to the ISO 5 classification. A production cleanroom according
to the ISO 6 classification is currently being
prepared. A laboratory according to the ISO 7
classification is available in the development
department.
PI has the capability to manufacture and qualify products under cleanroom conditions at a number of production sites. This capability is extended and improved
continually according to market needs. Depending on the processes at the respective locations, PI or its partners have the ability to clean parts and products at eachlocation according to the regulations and then check the cleaning results for particle
contamination and if necessary, for other types of contamination as well.
Calibrated particle measuring devices allow PI to monitor the cleanroom quality
according the specifications of ISO 14644-1.
PI also has the ability to measure the quantity of particles that originate from its
own products under operational conditions.

Particle per m3
Class0.1 µm

0.2 µmPI Ceramic, Lederhose, Germany
The entire process chain for multilayer production, beginning with tape casting, is realized at
PI Ceramic in cleanrooms according to class
7; the assembly processes for piezo compo­
nents and sensors also take place consistently
in class 7 or class 8 cleanrooms. Depending on
the process requirements, cleanrooms accord­
ing to ISO classes 7 to ISO 9 are available forfurther selected processes such as sputtering,screen printing, and dispensing.
PI miCos, Eschbach, Germany

0.3 µm

0.5 µm

1.0 µmISO 5

100,000

23,700

10,200

3,520

832

ISO 6

1,000,000

237,000

102,000

35,2008,320

5.0 µm293

ISO 7

352,000

83,200

2,930

ISO 8

3,520,000

832,000

29,300All assembly areas at PI miCos, including
incoming goods inspection, are cleanrooms
according to the ISO 8 classification. Someof these cleanrooms contain ultraclean workplaces according to the ISO 5 classification.
The Engineered Systems area also has acleanroom according to ISO class 7.
PI USA, Hopkinton
PI USA has an ISO class 8 assembly island in
the production area, which includes meas­
uring capabilities, cleaning, and packaging
under cleanroom conditions.
29

MOTION|POSITIONINGCAPABILITIES OF THE PI GROUP

Vacuum Know-How
Solutions for Positioning in Vacuum Conditions

PI offers high-precision solutions for positioning in vacuum conditions to 10–10 hPa. Positioning solutions in a vacuum follow clearly defined constraints. This applies to the limited installation space, as well as prevention of contamination and excessive heat input.
Selection of the optimum drive technology for the respective application and themechanical design must be matched exactly to the required load capacity andvelocity as well as the intended operating and planned duty cycles.
The handling regulations for vacuum positioning systems are just as important as
the design principles. Cleanrooms are available for assembling larger parts. Suitable
packaging and the corresponding instructions for the recipient are part of shipping.

At PI, several vacuum
chambers are available
in various sizes

Vacuum chambers are available in several sizes with vacuum levels down to10–10 hPa, where start-up and measurement of outgassing, but also interferometricmeasuring of position accuracy under real operating conditions is possible.

ESD Protection
Prevention of Malfunction or Breakdown of Electronic Devices
Automation equipment such as today´s motion systems enable the many thousandsof process steps required to manufacture a finished electronic device. These processes
involve a lot of touch and placement operations that place, align, process, inspect andtest the equipment around the site. Repeated handling and movement throughout the
manufacturing process is an essential factor that increases the potential for damage
to equipment from charging and subsequent electrostatic discharge (ESD).
ESD is the sudden flow of electric current that flows between two bodies at varying
electrical potentials. Common causes of ESD events are static electricity and electrostatic induction where an electrically charged object is placed near a conductive object
that is isolated from ground and then comes in contact with a conductive path.

30

When subjected to ESD, electrostatic sensitive objects, such as a wafers, chips, integrated circuits, sensors, electronics devices, and printed circuit boards, damage canbe immediate and may cause a catastrophic failure. ESD can also lead to partiallydamaged devices which may still conform to specifications, however; once built into
an electronic device, may cause reliability issues or premature failure.

W W W. P I . W S

PI uses its knowledge to minimize such risks, forexample by coating motion platforms with conductive electroless nickel, providing speciallyengineered cable management or drag chainsand common ground procedures to maintainlong-term conductivity.

From 1-off to Series:
OEM Customers Benefit From Maximum Flexibility

PI serves both the research and industrial markets. The complete control over the design and manufacturing process provides our customers with significant competitive advantages. Optimized processes
allow PI to deliver customized products in quantities up to several 100,000 units per year at low cost andright on time. The range of OEM products offered by the PI Group varies widely, ranging from “bare”
actuators and sensors to highly integrated parallel-kinematic positioning systems. Evaluation of preproduction run samples, test procedures, production processes and quality management are all includedin the development process.
ServicesnGlobal account management: Close proximity to the customer thanks to international presencenRisk assessment from design to deliverynDepending on the task: From the drive to the turnkey systemnCopy exactly policynPreparation of internal and external certificationnProduction of series of several 10,000 units in the shortest timen

Sustainable spare parts servicenManufacturing and testing capacities from functional samples to mass production

Standardized performance control with full documentation of individual measurement charts

MOTION|POSITIONING

31

CAPABILITIES OF THE PI GROUP

Global Service and After-Sales
Tailored Service Packages for High-End Positioning Systems

On-site training is key to optimize and maximize the potential of new PI systems

Start-Up, User Training and Life Long Support

Contracted Services

PI is dedicated to supporting its customers right from the initial consultation
through to when a customer has purchased a PI system. Beyond that, PI’s services
division is committed to ensuring that every aspect of owning a PI system iscatered for.

Customers subscribing to Contractual Support Services will receive commitment fromPI to achieving agreed Service Levels. These
include responding to the customer’s firstcontact and providing remote technicalsupport, through to response times for a PI
expert to be on site, either to repair or replacea defective unit.

Global Coverage
Supported by 4 Global Service Hubs in Asia, China, Europe and USA, with field
product specialists working from these hubs, PI is able to support all technologies and customer applications via this global services team.
PI’s Standard On-Site ServicesnS et up and Commissioning – On-site support to un-box, set-up andcommission the PI systemnT raining Program – User training on software and programming,
through to optimization of system performancenM aintenance Systems Health Check – Preventative maintenance toprolong the life of the motion devicenS upport – Ongoing remote and on-site support to maximize system
uptime and provide maintenance for the whole life of any system

32

W W W. P I . W S

Extended Warranty
Most customer applications require PI’s
systems to be operational beyond the standard warranty period. Extending the warranty for additional year(s), is simply extending
the customers peace of mind and PI’s commitment that the product will not fail due
to poor workmanship or faulty materials.
Should a customer’s system then fail due tothese conditions, PI will cover the costs torepair or replace it.

The PI GroupA Strong Partner for Industry and Research

PI (Physik Instrumente) has been one of the leading players in the
global market for precision positioning technology for many years.
The technological diversity of the PI Group is unique all over theworld. PI develops, manufactures, and qualifies all its core technologies itself. PI is therefore not dependent on components available
on the market to offer its customers the most advanced solutions.
The complete control over vertically linked manufacturing processes
allows flexible reaction to market developments and new requirements.
Modern organizational forms such as the fractal production model
guarantee efficient production for batch sizes of 1, small series, andalso OEM products in large quantities. By acquiring the majority
shares in ACS Motion Control, a worldwide leading developer andmanufacturer of modular motion controllers for multi-axis drive
systems, PI can also offer solutions from one single source to meetthe industry‘s increasing demands on precision and throughput.

Core TechnologiesnIn-house manufacturing of piezo components andpiezo actuatorsnMagnetic direct drives: linear motors and voice coilsnAir bearings, magnetic and flexure guidesnComprehensive range of piezo motor technologiesnNanometrology sensorsn arallel-kinematic systems for positioning in six axes
P
(Hexapods)nMotion control technologynSoftware

The foremost priority for PI is to be a reliable and highly qualified
partner for the customer.

33

MOTION|POSITIONING

The PI Group Milestones
A Success Story

PI has been developing and manufacturing
standard and OEM products with piezo or
motor drives for more than 40 years. Continuous development of innovative drive concepts, products, and system solutions andmore than 200 technology patents distin-

guish the company history today. In addition
to four locations in Germany, the PI Group isrepresented internationally by fifteen sales
and service subsidiaries. PI is a privately
owned company with healthy growth andmore than 1000 employees worldwide.

Market introductionof the PICMA®
multilayer piezo
actuators

Market introductionof PILine® ultrasonicpiezomotors

Foundation of PI Ceramicin Thuringia, Germany,
cornerstone for market
leadership in nanopositioning technology
Founding year
of PI

2002

2 0 01

1998

1994

1992

1993

Market introduction of capacitive
position sensors, implementationin piezo-based nanopositioning
systems

1991

1987

1970

Market introductionof six-axis parallelkinematic positioning
systems (Hexapods)

Market introductionof digital
control electronics
Newsubsidiaryin the USA

New
subsidiaryin Japan

New subsidiaries
in Great Britain
and France

34

W W W. P I . W S

Newsubsidiary
in ItalyNew
subsidiaryin China

2 0 172018Market introductionof the magnetic
PIMag® direct drives

2014

Introductionof air bearings

Acquisition ofmajority sharesin ACS Motion
ControlAcquisitionof Nelson
Air Corp., USA

2 0 11

2007

2004

Foundationof PI Innovation

2016

Acquisitionof majority sharesin miCos GmbH,
Eschbach, Germany

2015

Market introductionof the NEXLINE®
high-performancepiezo linear drives

PIRest active
shim piezo
technology
Market introductionof Q-Motion®
and PiezoMikes

Engineered
motionplatforms

Market introductionof NEXACT®
piezo linear drives
New subsidiaries
in Korea andSingapore

New subsidiaries
in Taiwan and theNetherlands

35

MOTION|POSITIONING|POSITIONING

Headquarters

ACS Motion Control

PI Subsidiaries

GERMANYISRAELUSA (East) & CANADA

USA (West) & MEXICO

Physik Instrumente (PI)GmbH & Co. KG
Auf der Roemerstrasse 176228 Karlsruhe
Phone +49 721 4846-0
Fax		 +49 721 4846-1019
info@pi.ws
www.pi.ws

ACS Motion Control Ltd.
Ramat Gabriel Industrial Park
1 Hataasia St.
Migdal HaEmek, 2307037
POB 984
Phone +972-4-6546440
Fax		 +972-4-6546443
info@acsmotioncontrol.com
www.acsmotioncontrol.com

PI (Physik Instrumente) L.P.
Auburn, MA 01501
www.pi-usa.us

PI (Physik Instrumente) L.P.
Irvine, CA 92620
www.pi-usa.us

USA (San Francisco Bay Area)

UK & IRELAND

PI (Physik Instrumente) L.P.
Sausalito, CA 94965
www.pi-usa.us

PI (Physik Instrumente) Ltd.
Cranfield, Bedford
www.physikinstrumente.co.uk

ITALY		NETHERLANDS

Physik Instrumente (PI) S. r. l.
Bressowww.pionline.it

PI Benelux B.V.
Sint-Oedenrode
www.pi.ws/benelux

FRANCE		SPAIN

PI France SAS
Aix-en-Provence
www.pi.ws

Micos Iberia S.L.
Vilanova i la Geltrú
www.pimicos.es

PI miCos GmbH
Freiburger Strasse 30
79427 Eschbach
Phone +49 7634 5057-0
Fax		 +49 7634 5057-99
info@pimicos.com
www.pi.ws
PI Ceramic GmbH
Lindenstrasse
07589 Lederhose
Phone +49 36604 882-0
Fax		 +49 36604 882-4109
info@piceramic.com
www.piceramic.com

JAPAN
PI Japan Co., Ltd.
Tokyo
www.pi-japan.jp

PI Japan Co., Ltd.
Osaka
www.pi-japan.jp

CHINA© Physik Instrumente (PI) GmbH & Co. KG
All contents, including texts, graphics, data etc., as well as their layout,
are subject to copyright and other protective laws. Any copying, modification or redistribution in whole or in parts is subject to a written
permission of PI.
Although the information in this document has been compiled withthe greatest care, errors cannot be ruled out completely. Therefore,
we cannot guarantee for the information being complete, correct and
up to date. Illustrations may differ from the original and are notbinding. PI reserves the right to supplement or change the information
provided without prior notice.

Physik Instrumente(PI Shanghai) Co., Ltd.
Shanghaiwww.pi-china.cn

Physik Instrumente(PI Shanghai) Co., Ltd.
Beijing
www.pi-china.cn

SOUTHEAST ASIA

TAIWAN

PI (Physik Instrumente)
Singapore LLP
Singaporewww.pi-singapore.sg
For ID / MY / PH / SG / TH / VNM

Physik Instrumente (PI)Taiwan Ltd.
Taipeiwww.pi-taiwan.com.tw

KOREA
Follow us on:

PI Korea Ltd.
Seoul
www.pikorea.co.kr

W W W. P I . W S

BRO64 R1 Motion Systems for Electronics Manufacturing 11/2018 2.5. Subject to change without notice. © Physik Instrumente (PI) GmbH & Co. KG 2018

MOTION