SIGRAFLEX®
Flexible graphite foils and sheets for semiconductor and LED industry↑ Sapphire single crystal growth↑ SiC sublimation growth↑ Si mono-crystal growth (CZ)

SIGRAFLEX products manufactured from expanded naturalgraphite improve the performance of systems and processes
in high temperature applications, minimize energy consumption and stand for reliability.
All processes used to grow semiconductor crystals operate athigh temperatures in aggressive environments – whether CZ
for silicon, HEM for sapphire or PVT for SiC bulk growth. This is
why the hot zones of industrial crystal growth furnaces aregenerally equipped with heat- and corrosion-resistant graphite
components.
SIGRAFLEX flexible graphite foils are free of adhesives andbinders. Demonstrating its extraordinary properties, it can beused in ultra-high temperature applications ranging up to3000 °C in inert atmosphere or vacuum. Superior thermal andelectrical conductivity makes it a suitable material for a wide
range of parts and components in poly crystalline silicon andsemiconductor, solar and other ceramic production equipment.
It can be provided in high purity (SIGRAFLEX TH or HP) andultra-high purity (SIGRAFLEX THP or UHP) to prevent productcontamination. SIGRAFLEX is often used in combination withSIGRATHERM® soft and rigid felts, SIGRABOND ® carbon fiber
reinforced carbon and SIGRAFINE® synthetic graphite.

Properties
Soft and flexible, inert, highly impermeable● Light weight, simple machining, cutting and punching● Thermal dissipation, electrically conductive,no static charges● Excellent chemical resistance● High purity● Sheets are available with pinholes for outgassing● No embrittlement, no aging● No wetting by glass, ceramic or metal melts● Very good resistance to thermal shock●← Protective liners and diffusion barriers –Off-gas from production parts can build up
undesired deposits and dendrites or could
corrode or oxidize graphite furnace parts.
SIGRAFLEX is used as a protective liner oncarbon and graphite components like rigid
felt resulting in a longer service life.

← Release liners – A low friction coefficient,being bendable and thermally conductive
makes SIGRAFLEX a perfect material forthis application. These properties allow
high efficiencies and short turnaroundtimes.

Material data of SIGRAFLEX® flexible graphite foils and sheets
Typical properties

Units

THTHPHP

UHP

Standard density

g/cm³

0.7/1.0/1.2/1.3

1.0

1.12

1.12%

≤ 0.15≤ 5 or10 ppm*

≤ 0.20≤ 200 ppm

≥ 99.999 or
99.9995*≥ 99.8≥ 99.98

Ash content(ASTM C561 or DIN 51903)
Carbon content%≥ 99.85

Material thickness(supplied as sheets)

mm

1.0/1.5/2.0/3.0

Material thickness(supplied on rolls)
Roll widthStandard roll length

0.15/0.2/0.25/ 0.35mm0.50/0.80/1.0mm
500/1000m50

0.25/0.35
0.5/0.75
500/1000
500.25/0.51
0.76/1.52
508/762/1524
960.25/0.51
0.76/1.52
up to 5030500 x 1000
1000 x 1000
up to 1500 x 2500
EU grade

500 x 1000
1000 x 1000
EU gradeup to1524 x 1524
US gradeup to1524 x 1524
US grade

Sheet sizes
Availability

mm0.76/1.52/3.05 0.76/1.52/3.05* Ash content ≤ 10 ppm and carbon content ≥ 99.999 % is standard, ≤ 5 ppm and ≥ 99.9995 % on request

Material data of SIGRAFLEX® TH with a density of 1.0 g/cm³
Typical properties

Sublimation temperature

Units

Values°C> 3000Temperature resistance

in airin inert gas and vacuum°C

approx. 400
approx. 3000

Specific electrical resistivity
(20 °C)

perpendicular to surface
parallel to surface

μΩm

700
11

Thermal conductivity
(20 °C)
Specific heat capacity (20 °C)

perpendicular to surface
parallel to surface

Wm⁻¹K⁻¹
kJkg⁻¹K⁻¹

5220
0.7

Thermal expansion coefficient(20 – 1000 °C)Permeability coefficient for air
Coefficient of emission (1500 °C)

perpendicular to surface
parallel to surface
perpendicular to surface

10⁻⁶K⁻¹
cm²/sapprox. 50approx. 1
2 x 10⁻⁵0.65

Typical element contents of SIGRAFLEX® TH and THP
Typical impurities

Units

THTHP

Alkali metals
Alkaline earth metals
Halogens
SulfurSiliconAsh content (DIN 51903)

ppm
ppm
ppm
ppm
ppm
ppm

60
5010560≤ 1500<1<1<1<11≤ 10

Unless stated otherwise, all values are valid at room temperature, typical, non-binding andsubject to change. For engineering or design purposes please contact our technical sales team.

TDS TH_THP_HP_UHP_Foil.02
07 2021/0 2NÄ Printed in Germany®
registered trademarks of SGL Carbon SE

Graphite Solutions | SGL CARBON GmbH | SGL Technic LLC
Sales Europe/Middle East/Africa | sigraflex-europe@sglcarbon.com
Sales Americas | sigraflex-americas@sglcarbon.com
Sales Asia/Pacific | sigraflex-asia@sglcarbon.com
www.sigraflex.com | www.sglcarbon.com

This information is based on our present state of knowledge and is intended toprovide general notes on our products and their uses. It should therefore notbe construed as guaranteeing specific properties of the products described or
their suitability for a particular application. Any existing industrial property
rights must be observed. The quality of our products is guaranteed under our“General Conditions of Sale”.