Environmental, Health and Safety Activities

Tokyo Electron’s corporate missions include placing the highest
priority on people’s health and safety and taking the global environment into account when conducting business activities.

Fundamental Policy
Tokyo Electron positions environmental, health and safety activities
as one of its most important management issues to achieve sustained corporate growth and continued development of society. With
that in mind, Tokyo Electron is committed to reducing environmentalloads across its activities, and to ensuring absolute safety in theCompany’s business premises and in those of its customers. Tokyo
Electron embodied these commitments in “TEL’s Credo and Principles on Environmental Preservation” and “TEL’s Safety and Health
Credo and Principles” formulated in 1998. The former statement
was reviewed and revised in May 2006 in light of the direction thebusiness was taking and the Company’s evolving approach to theseissues. Also, recognizing the need to deal with current global warming and climate change issues, in October 2007, Tokyo Electron
inaugurated an environmental steering committee in order to accelerate environmental response activities.
In May 2008, we codified Tokyo Electron’s environmental commitment, with “Technology for Eco Life” as the slogan guiding our environmental activities. One of the stipulated goals of this commitment is todevelop production equipment that will enable customers to cut thetotal environmental load of their factories in half by 2015, and to cut theCompany’s own environmental load from business activities and logistics in half by the same date. In fiscal 2009, we researched the criteria
and roadmaps to establish in preparation for fulfilling this commitment.
In fiscal 2010, we intend to flesh out the details of the plans and standards for reaching our goal.

EHS Management
Since 1997, Tokyo Electron has developed and implemented environmental management systems based on ISO 14001 standards, mainlyfor manufacturing operations, and obtained certification.

Adoption of Environmental Accounting
Tokyo Electron has introduced an environmental accounting systemthat quantifies the cost of its activities in respect of environmental
protection, and uses this as the basis for developing corporate
action policies.
For details of results for fiscal 2009, please refer to the Tokyo­Electron website.

Product-related Environmental Initiatives
Proactive Environmentally Conscious Product Design
As clearly set forth in our revised TEL’s Credo and Principles on
Environmental Preservation, Tokyo Electron believes that promotionof product designs sensitive to the environment is vital. Tokyo
Electron has positioned promotion of energy conservation in its
products, as well as reduction and replacement of hazardous chemicals, as priority issues.
1. Reducing Environmental Loads During Equipment Usage
In fiscal 2009, we established a roadmap for reducing environmentalloads in all business departments. When developing this roadmap,
we positioned reducing the energy requirements of our products,addressing chemical substance-related matters, reducing thenumber of parts and processes required, reducing the use of processing gases and liquid chemicals, and improving the environmental performance of existing equipment as essential categories. We
also set reductions in the processes required to start up equipment
as a voluntary category. In line with reducing both materials andprocesses, we are reviewing them as a part of development andpromoting relevant improvements.
Tokyo Electron follows the SEMI S23 Guide for Conservation ofEnergy, Utilities and Materials Used by Semiconductor Manufacturing
Equipment that was adopted as the global standard by the semiconductor industry. Tokyo Electron assesses the energy consumption ofits products in accordance with these guidelines.

Items in the Environmental Road Map for Each Division
1. Reducing the energy consumption of our products
2. Addressing chemical substance-related matters
3. Reducing the number of parts and processes in our products
4. Reducing the use of processing gases and liquid chemicals
5. Improving the environmental performance of existing equipment

ISO-14001-Certified Plants and Offices
Company/plantTokyo Electron AT Limited
Tokyo Electron PS LimitedTokyo Electron Tohoku Limited
Tokyo Electron Kyushu Limited
Tokyo Electron AT Limited
Tokyo Electron Device Limited

18Plant
Sagami Plant

Certification date
December 10, 1997

Certification number
1110-1997-AE-KOB-RvA

Tohoku Plant
Kumamoto/Koshi/Ozu/Saga plants
Yamanashi Plant (Fujii/Hosaka area)
Miyagi Plant
Yokohama OfficeFebruary 19, 1998
March 26, 1998
May 15, 1998
March 1, 2005
July 14, 2004

1118-1998-AE-KOB-RvA
1120-1998-AE-KOB-RvA
1124-1998-AE-KOB-RvA
01245-2005-AE-KOB-RvA
EC04J0144

Tokyo Electron Limited  Annual Report 09

2. Hazardous Substances in Products
As an environmental measure, Tokyo Electron promotes efforts toreduce hazardous chemical substances in its products. Chemicalsubstances found in the units and parts used in products are managed through a specialized database. One widely known measuretargeting such chemical substances is Europe’s RoHS*1 directive.
Although semiconductor and FPD production equipment are nottargets of the directive, we use it as a reference point in our drive tolimit the use of legally restricted chemical substances. This is inaddition to maintaining full compliance with compulsory laws andregulations such as the China RoHS directive.
Tokyo Electron has positioned those products in which at least
98.5% of the constituent parts meet standards stipulated by theEurope RoHS directive as “equipment with reduced chemical substances.” Shipment of these products has been ongoing since
October 1, 2008, with plans to gradually increase volume going forward. Tokyo Electron remains committed to further promoting thedevelopment and manufacture of eco-conscious products with theaim of becoming a more environmentally friendly company.
*1 Refers to the “Restriction of the use of certain Hazardous Substances in Electrical and Electronic Equipment” directive in Europe (2002/95/EC) and its amended version. With theexception of certain applications excluded from its scope, this directive prohibits the inclusionof lead, mercury, cadmium, hexavalent chromium, PBB, and PBDE over a maximum prescribed amount in products. (European Directive 2002/95/EC on the restriction of the use ofcertain hazardous substances in electrical and electronic equipment)

Health and Safety Activities

In fiscal 2009, we reduced the number of injuries excluding thoserequiring first-aid alone across the Tokyo Electron Group by approximately 20% year on year, and injuries requiring first-aid by more than
40%. Promoting activities aimed at curbing the number of accidents
further will remain our policy going forward.

Communicating With Stakeholders
The Tokyo Electron Group actively promotes communication withall stakeholders. To develop environmental, health and safety initiatives, we believe that it is vital to share information as much as
possible with all parties related to our business activities and toreceive feedback.
One example is efforts to give back to local communities. Our
philosophy states, “We place the highest priority on gaining the trust
and acceptance of customers, suppliers, investors, and communities
around the world” and “We therefore strive to be a faithful and cooperative member of the communities and nations where we do business.” In line with this philosophy, we engage in activities tocontribute to society and build relationships of trust with governments
and local communities around our facilities. These activities are conducted both in Japan and overseas.
For further details, see “Environmental and Social Report 2009” (to bepublished in September 2009).
http://www.tel.com/eng/citizenship/ehsreport.htm

Tokyo Electron promotes health and safety in all of its operations.
This includes giving top priority to the health and safety of ouremployees and customers and designing products with safety inmind. TEL’s Safety and Health Credo and Principles clearly state that
all employees are responsible for being constantly aware of healthand safety considerations in all their business activities.

Preventing Global Warming
Initiative for Coater/Developer CLEAN TRACK™ LITHIUS Pro™
A coater/developer is used to coat photoresist and develop theexposed pattern simultaneously in the lithography process (wherethe same photo development technology is applied) in manufacturing semiconductors. When we developed the CLEAN TRACK LITHIUS
Pro coater/developer by redesigning CLEAN TRACK™ LITHIUS™,
we concurrently worked to reduce the environmental impact of theoverall LITHIUS series. Specifically, we adopted a new exhaustsystem for hot plate chambers which directly uses exhaust air fromthe factory. We previously exhausted air by using compressed-air
powered ejectors. This shift enabled us to reduce the use of compressed air by 35% or more compared to the previous system. We
also worked to achieve a proper volume of nitrogen gas purge in thiscoater/developer, resulting in at least a 70% reduction in the use ofnitrogen gas. Through these improvements, the revised models’energy requirement per unit area of wafer was reduced by approximately 20%. When developing the new LITHIUS Pro, we incorporated energy-saving features, such as introducing an
inverter-equipped automatic control system for the humidifying
heater and the freezer within the temperature and humidity controller, and reducing the number of pumps used. As a result, LITHIUS
Pro requires 32% less electricity than the initial LITHIUS model. Itsenergy use per unit area of wafer was also slashed by 35% from theexisting LITHIUS model. We will continue to incorporate a greaternumber of energy efficient designs in all new products and adopt
such “green” features for existing models.

Annual Report 09

Tokyo Electron Limited

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