SIGRAFINE Advanced SiC®

Powering the next generation of LED
In order to meet the challenges of the next generation of LEDs,
SGL Carbon has developed the SIGRAFINE Advanced SiC coatingwith polycrystal orientation that is produced in our proprietaryhigh temperature process. The Advanced SIC coating offers
several advantages over standard coating.

Improved uniformity
SIGRAFINE Advanced SiC coating has a 50 % higher thickness
uniformity and offers a deeper SiC penetration inside thegraphite surface than the standard SIGRAFINE coating.
The improved SiC film uniformity enhances the photoluminescence (PL) uniformity, leading to a higher LED chip yield.

LED customer PL Standard Deviation (StDev) requirements
over timePL 3 spec range
25 —20 — = 5 nm
 = 3 nm15 —

 = 2 nm10 —

 = 1.2 nm  = 0.8 nm  = 0.5 nm

5—0—FR10–5 —
–10 —
–15 —
–20 —
–25 —
↑ Representative cross-section

2010

2015

Improved consistency
The SIGRAFINE Advanced SiC coating, in combination with ourown isostatic graphite grade SIGRAFINE R6810 with highest
thermal conductivity, best-in-class machining technology
for dimensional accuracy, and pocket design features, is abreakthrough in achieving < 1 nm yield in the production of next
generation mini- and micro-LEDs and semiconductor powerdevices.

100 µm↑ Micrograph of SiC surface↑ Fully automated inspection

20172019

2020

2021+

Improved lifetime
With SIGRAFINE Advanced SiC we are further extending the lifetime of our LED carriers to ensure that our customers get thelowest total cost of ownership. Through decades of research,development and experience, SGL Carbon has harmonized
the aspects of material and process to provide this industry
leading product with customer value always in mind.

MOCVD carrier lifetime evolution
Lifetime of top performing carriers each year (# runs)
450 —
400 —
350 —
300 —
250 —
200 —
150 —
100 —
50 —0—
2014

2015

2016

2017

2018

2019

20202021↑ Quality control of a wafer carrier (© 2018 Ricky Rhodes)

Production year

Material properties
Purity data of SIGRAFINE® SiC coating(glow discharge mass spectroscopy)

Material data of our SIGRAFINE SiC coating®

Typical properties

Units

Structure

Values*beta (cubic) 3C polytype

GPa
MPa m¹/ ²

Proprietary blend<311> preferred
3.2
1:1 Si/C40
3.0

Thermal expansion
100 – 600 °C (212 – 1112 °F)
E-modulus

10-⁶ K-¹
GPa

4.3
435

Typical film thickness
Surface roughnessµmµm

100(or customer specific)
2.5

Orientation
Bulk density
Stoichiometry
Hardness
Fracture toughness

Fraction [%]g/cm³* Typical average values. The actual individual values might vary dependent on
the product type. For any engineering/design purposes please always contact
our technical sales team.

Element

SodiumMagnesium
Aluminum
Phosphorus
SulfurPotassium
Calcium
Titanium
Vanadium
Chromium
ManganeseIron
Nickelppm

Elementppm< 0.05< 0.01< 0.04< 0.01< 0.04< 0.05< 0.05< 0.005< 0.001< 0.05< 0.005< 0.01< 0.005

CopperZinc
Gallium
Germanium
ArsenicIndium
Tin
Antimony
Tungsten
Tellurium
Lead
Bismuth

< 0.01< 0.05< 0.05< 0.05< 0.005< 0.01< 0.01< 0.01< 0.01< 0.01< 0.01< 0.01

SiC coating process
SiC is deposited as thin layers on SGL Carbon isostatic graphiteby chemical vapor deposition (CVD). Deposition takes typicallyplace at temperatures above 1200 °C (2192 °F). The thermal
expansion behavior of the substrate material should beadapted to the SiC coating to minimize thermal stresses.

1Production process for SIGRAFINE® fine-grain graphite with SIC coating
12354611810800 –1200 °C+12≥ 2700 °C

2500 – 3000 °C
71399≥ 1200 °C

1 Coke, graphite
2 Grinding
3 Binder pitch

4 Mixing
5 Extruding
6 Vibro molding

7 Isostatic pressing
8 Carbonizing
9 Pitch impregnation

10 Graphitizing
11 Machining
12 Purifying
13 SiC coating

The SGL Carbon technical team is readyto collaborate with you to help you achieve
your performance targets.

Contact
Europe / Middle East / Africa
SGL CARBON GmbH
Drachenburgstrasse 1
53170 Bonn/Germany
gs-europe@sglcarbon.com
Americas
SGL CARBON LLC
900 Theresia Street
PE 15857 St. Marys / USAgs-americas@sglcarbon.com
Asia / Pacific
SGL CARBON Far East Ltd.
151 Huan Chen Dong Lu
Shanghai Fengpu Industrial Development Zone
201 401 Fengxian/China
gs-asia@sglcarbon.com

03 2021/0 E Printed in Germany
registered trademarks of SGL Carbon SE®

Graphite Solutions
SGL CARBON GmbH
Soehnleinstrasse 865201 Wiesbaden / Germany
www.sglcarbon.com/gs

This information is based on our present state of knowledge and is intended toprovide general notes on our products and their uses. It should therefore not
be construed as guaranteeing specific properties of the products described or
their suitability for a particular application. Any existing industrial property
rights must be observed. The quality of our products is guaranteed under our“General Conditions of Sale”.