Product Information

M‐Series RF Power Supply (Generator) Analog Interface Connections
The analog interface connector is located on the rear panel of the Radio Frequency Power
Supply. Control and status signals for the RF Power Supply are available on this connector. See
the tables below for descriptions of the interface connector signals.
The 25-pin M-Series Analog Interface is pin-compatible with the 25-pin Analog Interface usedon the Seren IPS R/LX01-Series and HR-Series RF power supplies, however not all features andfunctions of the R/LX01-Series or HR-Series RF power supplies are supported.

Analog Interface Connector Pin List – 25-Pin Female Analog Interface
PIN13PIN1

PIN 25

PIN 14ANALOG INTERFACE

Pin Locations, 25-Pin Analog Interface Connector
PIN LIST: M-SERIES 25-PIN FEMALE ANALOG INTERFACE CONNECTORPIN

SIGNAL NAMEDESCRIPTION

1(No Connection)

No connection / Not used.

2INTERLOCK

External Interlock. TTL – compatible input, active low, with aninternal pull-up resistor.
A contact closure between pin 2 and pin 15 or a TTL “low” signal
applied to pin 2 is required before the RF output can be enabled.
An open circuit or a TTL “high” signal applied to pin 2 while theRF output is enabled, will cause the RF output to turn off.
An open circuit or a TTL “high” signal applied to pin 2 while theRF output is off, will prevent the RF output from being enabled.
This signal is active in all control modes.

3RFON*

RF Output Enable/Disable. TTL – compatible input, active low,edge triggered, with an internal pull-up resistor.
A contact closure between pin 3 and pin 16 or a TTL signaltransition from “high” to “low” applied to pin 3 enables the RFoutput, provided Pin 2 is at TTL “low” state.
An open circuit between pin 3 and pin 16 or a TTL signaltransition from “low” to “high” applied to pin 3 disables the RFoutput.
This signal is active only in “Analog” control mode.

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Product Information
PIN LIST: M-SERIES 25-PIN FEMALE ANALOG INTERFACE CONNECTOR
PIN

SIGNAL NAMEDESCRIPTION

4PWR/VLT*Power or Voltage leveling mode select. TTL – compatible input
with internal pull-up resistor.
An open circuit or TTL “high” signal applied to pin 4 selects thepower supply’s internal power sensor for power regulation.
A contact closure between pin 4 and pin 16 or a TTL “low” signal
applied to pin 4 selects forward power regulation based on an
external feedback signal (FEEDBACK signal – Pin 12).
Refer to the controls section of the operator’s manual for
detailed instructions on how to configure and use this mode.

5(No Connection)

No connection / Not used.

6(No Connection)

No connection / Not used.

7(No Connection)

No connection / Not used.

8RFENABLED*RF output status signal. Active low, open collector output.
24VDC maximum, 15mA maximum current sink, 150mW
maximum power dissipation. Internally pulled-up to +5VDC via
a 10K-Ohm resistor.
Signal output is 0V ("low") for an RF on condition; signal output
is “open” (or "high", with +5V pull-up enabled) for an RF offcondition.
The RFENABLED* signal can also indicate the presence ofexcessive reflected power by changing from a “low” state to a“high” state when the RF output is enabled. Refer to “Reflected
Power Alarm ON/OFF” and “Reflected Alarm Threshold” in the
Programmable Parameters section for details.
The RFENABLED* output signal may also be used to preposition Seren IPS Inc. AT-Series Matching Networks. Refer to“Matching Network Preset Mode”, “Tune Capacitor PresetPosition”, and “Load Capacitor Preset Position” in the
Programmable Parameters section. Requires +5VDC pull-up
enabled.
Note: This pin may be configured as internally pulled up to+5VDC (factory default configuration) or without a+5VDC
pull-up.
(OEMcustomconfigurations).
Configuration is set at the factory.
Use pin 18 for a reference return.

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Product Information
PIN LIST: M-SERIES 25-PIN FEMALE ANALOG INTERFACE CONNECTOR
PIN

SIGNAL NAMEDESCRIPTION

9GND

Internally connected to chassis ground. Connect to systemcontroller common or ground reference.
Return reference for Forward Power Monitor output signal (pin10) and Reflected Power Monitor output signal (pin 11).

10FWD MON

Forward power monitor output signal. Analog output, selectable
0 to +5VDC or 0 to +10VDC range.
High Power Range: Output is linearly proportional to 0 to 100%of rated forward power.
Low Power Range: Output is linearly proportional to 0 to 10% ofrated forward power. (standard configurations - see Output
Power Range Select parameter detail).
Refer to the Power Monitor Scaling subsection in theappropriate model specification for forward power monitor
scaling details.
The forward power monitor output signal may also be used topre-position Seren IPS Inc. AT-Series and ATS-Series Matching
Networks. Refer to “Matching Network Preset Mode”, “Tune
Capacitor Preset Position”, and “Load Capacitor Preset Position”
in the Programmable Parameters section of the operator'smanual.
Measure monitor voltage with respect to pin 9 (GND)

11

REFP MON

Reflected power monitor output signal.
Analog output,
selectable 0 to +5VDC or 0 to +10VDC range.
High Power Range: Output is linearly proportional to 0 to 100%of rated reflected power.
Low Power Range: Output is linearly proportional to 0 to 10% ofrated reflected power. (standard configurations - see OutputPower Range Select parameter detail).
Refer to the Power Monitor Scaling subsection in theappropriate model specification for reflected power monitor
scaling details.

The reflected power monitor output signal may also be used topre-position Seren IPS Inc. AT-Series and ATS-Series Matching
Networks. Refer to “Matching Network Preset Mode”, “TuneCapacitor Preset Position”, and “Load Capacitor Preset Position”
in the Programmable Parameters section of the operator'smanual.
Measure monitor voltage with respect to pin 9 (GND).

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Product Information
PIN LIST: M-SERIES 25-PIN FEMALE ANALOG INTERFACE CONNECTOR
PIN

SIGNAL NAMEDESCRIPTION12FEEDBACK

External feedback voltage signal. Analog input, 0 to +10.0VDC .
Use pin 16 or 17 or (GNDI) for return reference.
The RF Power Supply will automatically adjust its output power
to maintain the FEEDBACK signal’s magnitude at the samelevel as the SETPOINT signal magnitude. The PROBE voltage
can be displayed on the optional Display Panel or retrieved via
the communications interface (Serial, Ethernet). The PROBE
attenuation factor can be configured from the optional Display
Panel or through the communications interface (Serial,Ethernet).
The external feedback signal is derived from a voltage probe(RF or DC) located elsewhere in the plasma or process system.
Refer to the controls section for detailed instructions on how toconfigure and use this mode.
Note: The feedback voltage polarity must be Positive (+). The
RF Power Supply’s external feedback circuitry is notdesigned to function with Negative (-) polarity signals
applied to this pin.

13SETPOINT

Power or Voltage setpoint input. Analog, high-impedance,differential input with selectable 0 to +5.0VDC or 0 to +10.0VDC
range.
High Power Range: Input is linearly proportional to 0 to 100% of
rated forward power.
Low Power Range: Input is linearly proportional to 0 to 10% of
rated forward power. (standard configurations - see Output
Power Range Select parameter detail).
Refer to the controls section of the operator’s manual for
detailed instructions on how to configure and use this mode.
Note: SETRET (pin 25) MUST be referenced to common or
ground at the setpoint voltage source (system controller)
or the RF output power will behave erratically.
Refer to the Analog Setpoint Sensitivity subsection of theappropriate model specification for setpoint sensitivity
details.
Note: Feedback voltage range and polarity must match
setpoint voltage range and polarity for proper operationin voltage control mode.
Active only in ANALOG control mode.

14(No Connection)

No connection / Not used.

15INTERLOCK-RTN(GNDI)

Ground return for External Interlock (pin 2). Internally connectedto isolated ground.

16

GNDI

Ground return for pins 3 and 4. Internally connected to isolatedground.
Connect to system controller common or ground reference

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Product Information
PIN LIST: M-SERIES 25-PIN FEMALE ANALOG INTERFACE CONNECTOR
PIN

SIGNAL NAMEDESCRIPTION

17GNDI

Ground return for pins 3 and 4. Internally connected to isolatedground.
Connect to system controller common or ground reference.

18

RFENABLED RET(GNDI)

Ground return for pin 8 (RFENABLED* signal).
Internallyconnected to isolated ground.
Connect to system controller common or ground reference.

19(No Connection)

No connection / Not used.

20(No Connection)

No connection / Not used.

21(No Connection)

No connection / Not used.

22

GNDI

Isolated Ground.
Connect to system controller common or ground reference

23

GNDI

Isolated Ground.
Connect to system controller common or ground reference

24

GNDI

Isolated Ground.
Connect to system controller common or ground reference.

25

SETRET(GNDI)

Setpoint Return. Internally connected to isolated ground.
Note: This pin must be connected to a ground reference or theunit’s output will behave erratically.

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Product InformationTypical Analog Interface Connections (Analog Control)
There are many possible analog interface wiring schemes. Basic analog interface
connections are diagrammed below. Refer to the Analog Interface Connector pin list in theRear Panel Controls and Connections section of the operator's manual for signal details.
Use shielded cable for all interconnections.

RF POWER SUPPLY
2INTERLOCK

15

INTERLOCK-RTN

3RFON*

4

PWR/VLT*

16

GND

17GND

9GND

10FWD MON+V-

REF MON+V-

2211238RFENABLED*18

RFENABLED RETGNDI+5VDC OR+10VDC
13SETPOINT25SETRETCHASSISSHIELD
SHELL

Typical Analog Interface Connections

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Product Information
Notes:
 The information in this document is provided as a convenience. For detailed information,
consult the product's Operator's Manual.
 For assistance with technical matters, contact your local Seren IPS Inc. representative orthe factory.
 All features or functions may not be supported on OEM and custom-configured products.
 In the event of a discrepancy between this document and the product Operator's Manual,
the Operator's Manual is the prevailing authority.
 Specifications and information in this document subject to change without notice.

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