Research Group for Flexible Technologies (Nakada/Furukawa/Yuki/Koden)

Academia-Industry Cooperation“Needs First”
Research Group for Flexible Technologies(Nakada/Furukawa/Yuki/Koden)
2022

Professor
Hitoshi Nakada

Associate Professor
Tadahiro Furukawa

Associate Professor
Dr. Toshinao Yuki

Mission and Activity

p.2～3

Consortium（YU-FIC, YU-FLEC）

p.4～5

Professor
Dr. Mitsuhiro Koden

Background technologies
・OLED & OPV device fabrication
・Evaluation of OLED & OPV・R2R (Roll-to-roll) and printing technologies
・Evaluation of gas barrier / International standardization

p.6
p.7
p.8
p.9

Developed technologies
・Flexible OLEDs on ultra-thin glass
p.10
・Improved mechanical strength of flexible OLEDs on ultra-thin glass p.11
・Flexible OLEDs on stainless steel foil or barrier film
p.12
・R2R fabrication of barrier film with transparent electrodep.13
・In-mold electronics (IME) technology
p.14
・Mechanism analysis of electrode disconnection in 3D thermoforming p.15
・Application of organic electronics to interactive advertisement
p.16
・Non-ITO transparent electrode with implanted metal-mesh structure p.17
・TFE (Thin Film Encapsulation) technologies for OLEDs
p.18
・OnDemand patterning of OLEDs by ink-jet printed insulators
p.19
・Barrier layer by ALD (Atomic layer deposition)
p.20
・High temperature tolerant barrier films for flexible OLEDs
p.21
・Printed flexible OPV fabricated by R2R processes
p.22
・PSA encapsulating technologies for OLEDs
p.23
・Spray coating
p.24
・Optical simulation
p.25
・Analysis of defects, failures, structures, etc.
p.26

Topics/Publications

p.27

Main members

p.28“Award from Minister Printable Electronics
of State for Science and2017 Award
Technology Policy”
Cabinet Office of Japan(2017)

JFlex Award(2019, 2020)

Homepage： https://inoel.yz.yamagata-u.ac.jp/F-consortium/home-e.html

Research Group for Flexible Technologies (Nakada/Furukawa/Yuki/Koden)
Activity

Academia-Industry Collaboration“Needs First!”

In flexible organic electronics technologies, we offer academia-industry
collaboration with “Needs First”, in which needs and requests fromcollaborating companies are first priority.
We contribute R&Ds of collaborating companies, aiming at practicaltechnologies and actual businesses.
Our activity with “Needs First” was awarded from Minister of State for Scienceand Technology Policy, Government of Japan in 2017.
(Main technologies)■ Devices and processes of organic electronics (OLED, OPV, OTFT, etc.)■ Materials and components for flexible organic electronics■ Barrier technologies / Barrier evaluation and analysis / Flexible encapsulation■ Printing and roll-to-roll (R2R) technologies for flexible organic electronics“Award from Minister of State for
Science and Technology Policy”
Cabinet Office,
Government of Japan (2017)

Collaboration scheme
Discussion
Planning
Contract
Experiment, evaluation, etc.
Feedback

Unique points

Collaborations

Skills of members・ “Needs First” (Business First)
・Device fabrication with collaborating
Company’s needs are first priority. company’s technologies and feedbackof all results to the company
・ Merits in IPs
・ Self‐supporting accounting system ・Data for proofing potential of theAn unique model based ontechnologies of collaborating company.
collaboration with industry
・Prototype samples
・Coordination of plural companies
・Individual collaboration / Consortium /International collaboration

Evaluation / Developmental support

・Substantial experience in thepractical development at previous
companies.
・ Rich knowledge on organic
electronics (OLEDs etc.), displays,
flexible, R2R, printing, etc.
・Rich information about trends oftechnologies and businesses.
・Rich human network in academic
society and industrial fields.

Prototype / Lab. sample

Activities⚫ Academia-Industry Cooperation Consortium (p.3～p.5)⚫ National Project (p.3)⚫ Individual Collaboration⚫ Evaluation support (p.8)：WVTR (Water Vapor Transmission Rate) evaluation with MORESCO

2

Research Group for Flexible Technologies (Nakada/Furukawa/Yuki/Koden)
Activity

Consortium / National Projects

Based on the concept of “Needs First”, we promote academia-industry collaboration
consortiums and participate various national projects.

Academia-Industry Collaboration Consortium

National Projects

3

Research Group for Flexible Technologies (Nakada/Furukawa/Yuki/Koden)
Consortium

Yamagata University Flexible Electronics Japan-Germany
International Collaborative Practical Utilization Consortium (YU-FIC)
Yamagata University Flexible Electronics Japan-Germany International Collaborative
Practical Utilization Consortium (YU-FIC) collaborates with companies and institutes inGermany, aiming at novel flexible electronics products.
Project term

Participants

October 2017 ～ March 2023

Subjects

9 Companies (Jan. 2022)

Leaders➢ Innovative roll-to-roll fabrication of OLED
lighting on flexible substrates➢ Application of organic electronics technologies tointeractive advertisement➢ Fabrication technologies for three dimensional
print circuit boat (3DPCB)➢ Project leader: Associate Prof. T. Furukawa➢ Fellow: Prof. T. Takahashi➢ Secretary: Prof. M. Koden

Collaboration with German activity
YU-FIC collaborates with 24 German companies and institutes which are organized by Organic
Electronics Saxony (OES), having twice visits a every year, respectively.

Activity✓ Mutual visits between Germany and Japan.
✓ Frequent remote meeting between Germany and Japan.
✓ Demonstrations of collaborated results at conferences and exhibitions.

LOPEC/Germany (Mar. 2019)

Flex Japan 2019 (May 2019)Japan (Jan. 2020)

Germany (Sep. 2019)

JFlex (Jan. 2020)

The 9th Germany-Japan Joint Workshop (Online) “Flexible, Printed Electronics and Sensors”, 26 February (2021).
Related programWeb page⚫ MEXT: Construction Program of Open Innovation Organization [FY2018～FY2022].
⚫ JST: OPERA Program Grant Number JPMOP1614 [FY2016～FY2021].
⚫ Home page： https://inoel.yz.yamagata-u.ac.jp/yu-fic-en/⚫ You Tube： https://www.youtube.com/watch?v=Zu9DZH4Nq6c

4Research Group for Flexible Technologies (Nakada/Furukawa/Yuki/Koden)
Consortium

Yamagata University Flexible Electronics
Consortium for Academia-Industry Cooperation (YU-FLEC)
Yamagata University Flexible Electronics Consortium for Academia-Industry
Cooperation (YU-FLEC) is constructed by one-by-one collaborations with individualcompanies, promoting practical development based on the concept of “Needs First”.
We would appreciate it if you are interested in YU-FLEC.
Mission and Subjects
Project term
Practical R&D in flexible electronics
・Flexible substrates
・Gas barrier and flexible encapsulation
・process technologies for flexible devices
・Novel electrodes (Non-ITO electrode)
・Next-generation materials and devices
・Equipment

January 2018 ～ March 2023

Participants (total)
17 Companies (January 2022)

Unique points➢ Academia-industry collaboration led byscientists having rich experience in actual
businesses➢ Large size equipment for various prototypes➢ Creation of business competitivenessLeaders➢ Project leader: Dr. T. Yuki (Associate Prof.)➢ Fellow: Prof. H. Nakada➢ Secretary: Prof. M. Koden

Main applications

Activities➢ Small flexible OLED displays (mobile, etc.)➢ Large size OLED displays (TV, etc.)➢ Flexible OLED lighting◼ Application of flexible substrates to OLEDs
・Stainless steel foil・Barrier film
◼ Gas barrier technologies
・Evaluation of gas barrier properties
・Fabrication technologies of gas barrier layers◼ Flexible encapsulation
・TFE (Thin Film Encapsulation)
・PSA encapsulating technology
・Laminating encapsulation◼ Non-ITO transparent electrode・Metal mesh electrode◼ OLED devices and processes
・OnDemand patterning of OLED
◼ Novel materials for emission devices
・Evaporation materials
・Solution materials◼ Novel emission devices
・QLED
・Novel TFT technologies◼ Novel components for organic electronics◼ Equipment for organic electronics
・Evaporation equipment
・Deposition of barrier layers
・Ink-jet
Related program⚫ MEXT: Construction Program of Open Innovation Organization [FY2018～FY2022].

Seminar⚫ Monthly report for YU-FLEC members by Prof. H. Nakada “Trend of organic electronics”⚫ Bimonthly report for YU-FLEC members by Prof. M. Koden “Trend of organic electronics - OPV”
⚫ 1st YU-FLEC seminar (Aug. 2019 Tokyo).

Web page⚫ Home page： https://inoel.yz.yamagata-u.ac.jp/yu-flec-en/

5Research Group for Flexible Technologies (Nakada/Furukawa/Yuki/Koden)
Backgroundtechnologies

OLED & OPV Device Fabrications

Various types of OLED & OPV devices are able to be fabricated. The fabricated OLED &OPV devices are utilized for technological evaluations, prototype samples, etc.
OLED (Organic Light Emitting Diode)

Processes for organic layers■ Materials
・Small molecular and polymer materials
・Fluorescent, phosphorescent and TADF
・Quantum dot (QD) materials■ Devices
・Bottom emitting & Top-emitting
・Transparent OLED (Both side emitting)・Multi-photon
・White emitting

・Dry process: Vacuum evaporation
・Solution process: Spin-coat, Ink-jet, Spray, etc.

Vacuum evaporation

Ink-jetSpin-coat

Wet cleaning

Plasmacleaner

OPV (Organic Photovoltaic)■ Materials
・Vacuum & Coating
・Quantum dot (QD)

■ Devices
・Normal structure
・Inverted structure

Spray

Barrier layers

Encapsulations
Various encapsulating technologies are applied.
・Common encapsulation with desiccant
・Flexible all-solid type encapsulation

・Inorganic barrier layer: CVD, Sputtering, ALD
・Inorganic/organic alternatingly stacked barrier
layer

R2R sputtering & CVD

DesiccantN2
CathodeOrganic layers

Sealant

Sealant

Counter Glass substrate

Anode

ALD
(Atomic Layer Deposition)

Substrate

Sheet-type lamination

Flexible substrate

Resin
CathodeOrganic layers

Anode

Sputtering

Ink-jetFlexible substrate

Large size OLEDs

Roll-type lamination

Flexible OLEDs

Large size OLED devices can be fabricated.
The maximum substrate size: 30cm×30cm

Flexible OLED devices with various designs canbe fabricated.

OLED vacuum evaporationequipment “ELVESS” (Tokki)

6Research Group for Flexible Technologies (Nakada/Furukawa/Yuki/Koden)
Backgroundtechnologies

Evaluation of OLED & OPV

OLED and OPV devices with various technologies (materials, components, device
architectures, processes, equipment, etc.) of collaborating companies are fabricated andevaluated from practical points of view. All evaluating results are feedbacked to thecollaboratingcompany for not only the next development
but also demonstrations etc.
A170728A1-1
A170728A2-1

A1707
SCP-063
SCP
Evaluaitons of OPVs
あり of OPV devices are evaluated,
無Power generations

無し of OLEDS
Evaluations

2mm

1.0E+01
1.0E+00
1.0E-01
1.0E-02
1.0E-03

1.0E-04
1.0E-05
1.0E-06

using solar simulator.

1.0E+04

1.0E+02

Luminance (cd/m2)

Current density (mA/cm2)

あり
Various characteristicsof OLEDs are evaluated.
・Emission quality such as uniformity, defects, etc.
・I-V, L-I characteristics
・Emission spectrum, etc.

0

2

4

1.0E+03
1.0E+02
1.0E+01
1.0E+00

6

1.0E-01
1.0E-03 1.0E-02 1.0E-01 1.0E+00 1.0E+01 1.0E+02

2)
１SUN(1000W/m
Current density (mA/cm2)
AM1.5 room temperature～100,000 LUXVoltage (V)Uniform emission

I-V characteristics

Driving lifetime

Storage lifetime

The reduction of emission intensity of OLED
devices under constant current driving isevaluated.
Luminance (normalized)

Solar simulator
Newport MODEL 66902

The change of emission is observed after storage
test with high temperature and high humidity.

100%
80%
60%

40%
20%
0%

0

500

1000 1500 2000
Time (hour)

2500

Initial emission(No defect)

3000

Emission after storage
test (Dark spot)

Driving lifetime
Bending tests

Others

The influences of various bending stress on
device characteristics, barrier properties, etc.
are evaluated using three types of bending
equipment.

Other evaluations can be used, based on therequest from collaborating companies.
(Example)・Ionization potential
・Defect analysis
・SEM, AFM
・3D profile

37.2μmU-shape sliding

43.4μmFolding

Ionization
potential

Both-side
bending

7

38.4
AFM

Hybridconfocalmicroscopy

Research Group for Flexible Technologies (Nakada/Furukawa/Yuki/Koden)

Roll-to-roll (R2R) and Printing
Technologies

Backgroundtechnologies

We provide roll-to-roll (R2R) and printing technologies, aiming at an innovation of
productions in flexible organic electronics.
Roll-to-roll (R2R)
Three types of unique roll-to-roll (R2R) equipment are utilized for fabrications of electrodes,
barrier layers, organic layers, etc.
・Substrate width：30cm
・Substrate: ultra-thin glass, stainless steel foil, flexible film

R2R sputtering&CVD(KOBELCO)

R2R screen printing
and slit-coating(SERIA)R2R wet cleaning(FEBACS)

Printing / Coating
Various printing and coating equipment can be utilized for printing tests and device fabrications.

Screen printing

Flexography andgravure offset printing

Ink-jetSpray

Spin-coating

Evaluation

Process technologies
Various equipment for process
technologies can be used.

Various evaluationequipment are used for
R&D of printing and rollto-roll (R2R) technologies.
Contact angle measurement

Cutting machinefor ultra-thin glass

3D thermoforming

Precise position
detector

8

Viscoelasticity
measurement

Hybridconfocalmicroscopy

Research Group for Flexible Technologies (Nakada/Furukawa/Yuki/Koden)

Evaluation of Gas Barrier /International Standardization

Backgroundtechnologies

Evaluation of gas barrier properties is very important in flexible organic electronics
technologies. We provide two evaluation methods which are “Calcium corrosion method”
and “MA method (Modified differential pressure method with an Attached support)”.
In addition, we contribute to SEMI international standardizations of gas barrier films.
Ca corrosion method✓ Ca corrosion method evaluates the optical change in Ca reflectivity which changes by the reaction of
Ca and H2O, giving WVTR (Water Vapor Transmission Rate) valuers.
This method is useful for the evaluationof defects in barrier layer.
・Ca+2H2O→Ca(OH)2+H2✓ SEMI D78 - Test Method of Water Vapor
Barrier Property for Plastic Films with High
Barrier for Electronic Devices

1.2×10-4 g/m2/day 1.3×10-4 g/m2/day 7.3×10-5 g/m2/day 1.4×10-4 g/m2/day

Microscopic observation of Ca corrosion

Glass substrate
Wax

Al (1mm)
Ca (100nm)
Barrier layer
Flexible substrate
Structure of Ca corrosion device

Evaluation equipment

WVTR (Water Vapor Transmission Rate) evaluation(Collaborating with MORESCO)

MA method➢We provide WVTR (Water Vapor Transmission Rate) evaluation, using the WVTR measurement
equipment “Super Detect” of MORESCO.
➢The “Super Detect” utilizes the MA method (Modified differential pressure method with an Attachedsupport) developed by the collaboration of MORESCO and AIST (National Institute of Advanced
Industrial Science and Technology).
➢SEMI D80 - Test Method for Measurement of Water Vapor Transmission Rate for High Gas Barrier Plastic Filmin a Short Time
1.0E+00

Storage: 40℃/90%RH
1.1×10-1 (g/m2/day)

WVTR (g/m2/day)

1.0E-01
1.0E-022.3×10-4 (g/m2/day)
4.4×10-5 (g/m2/day)

1.0E-03
1.0E-04
1.0E-05

4.6×10-5 (g/m2/day)

WVTR equipment(MA method)

1.0E-06

0.0

50.0
100.0
Storage time (hr)150.0

Evaluation of film substrate✓ SEMI D74 - Guide for Measuring Dimensions of Plastic Films/Substrates
Collaboration
Related program

TEIJIN LIMITED, MORESCO Corporation⚫ MEXT: Construction Program of Open Innovation Organization [FY2018～FY2022].
⚫ JST: OPERA Program Grant Number JPMOP1614 [FY2016～FY2021].

9

Research Group for Flexible Technologies (Nakada/Furukawa/Yuki/Koden)
Developed
technology

YU-FIC

Flexible OLEDs
on Ultra-thin Glass
装置

We develop flexible OLED lighting devices on ultra-thin glass with electrodes fabricatedby roll-to-roll (R2R) technologies.
Technological features◼ Advantages of ultra-thing glass G-Leaf® of Nippon Electric Glass・Flexibility due to the thickness of 50mm; Applicability to Roll-to-roll (R2R) fabrication
・Intrinsic advantages of glass(High gas barrier, surface smoothness, temperature stability, chemical stability, size stability, etc.)

Developed technologies◼ Flexible OLED devices on ultra-thin glass with the thickness of 50mm.
・Roll-to-roll (R2R) photolithography-free fabrication of electrodes
・Unique glass cutting technology giving no damage to OLED devices with ultra-thin glass
・Flexible laminating encapsulation matching with ultra-thin glass

Cutting of substrates with ultra-thin glass(Mitsuboshi Diamond Industrial)

Ultra-thin glass withpatterned electrodes(Nippon Electric Glass)
Collaboration

Fraunhofer FEP, Nippon Electric Glass Co., Ltd., SERIAENGINEERING,INC., FEBACS CO., LTD., Mitsuboshi DiamondIndustrial Co., Ltd., NIPPON STEEL Chemical & Material Co., Ltd.,FUJIKURA KASEI CO., LTD., Taica Corporation, tesa tape K.K.

Related program ⚫ Yamagata University Flexible Electronics Japan-Germany International Collaborative
Practical Utilization Consortium (YU-FIC) [Oct. 2017～Mar. 2023].
⚫ JST: OPERA Program Grant Number JPMOP1614 [FY2016～FY2020].
⚫ MEXT: Construction Program of Open Innovation Organization [FY2018～FY2022].

Publication⚫ T. Furukawa, M. Koden, IEICE Trans. Electron, E100-C, 949 (2017).
“Novel roll-to-roll deposition and patterning of ITO on ultra-thin glass for flexible OLEDs”⚫ T. Furukawa, J. Hauptmann, T. Nakagaki, R. Ikeuchi, M. Sagawa, D. Nagata, J. Nakatsuka, IDW’21,
FLX5/FMC6-1 (2021). “Roll-to-Roll Fabrication for OLED Lighting Using Ultra-Thin Glass Substrate andEncapsulating Stainless Steel Foil”⚫ T. Nakagaki, T. Kawabata, H. Takimoto, T. Furukawa, IDW’19, FLXp1-9L (2019).
“Scribing Tool and Cutting Method for Ultra-thin Glass”⚫ T. Furukawa, K. Mitsugi, S, Akiyama, H, Itoh, D, Kobayashi, T. Suzuki, H,kuroiwa, M, Sakakibara, K,Tanaka, M,
Kawamura, M, Koden, IDW’14, FLX3-4 (2014). “Patterned ITO Film by Roll-to-Roll Process on Ultra-thin Glass”

10Research Group for Flexible Technologies (Nakada/Furukawa/Yuki/Koden)
Developed
technology

YU-FIC

Improved Mechanical Strength of装置
Flexible OLEDs on Ultra-thin Glass

We develop technologies for improvement of mechanical strength of flexible OLED
devices fabricated on ultra-thin glass.
Technological features◼ Improved mechanical strength of flexible OLED devices ultra-thin glass with the thickness of 50mm.

Developed technologies◼ Improved mechanical strength by encapsulation with stainless steel foil.
◼ Reduced side edge crack under glass cutting.
◼ Improved impact stress by unique silicon gel.

Device structure

Young’s modulus of various materials

Pressure stress test （αGEL）

Drop Impact test（αGEL）
Collaboration

Nippon Electric Glass Co., Ltd., Mitsuboshi Diamond Industrial Co., Ltd.,NIPPON STEEL Chemical & Material Co., Ltd., Taica Corporation,tesa tape K.K.

Related program⚫ Yamagata University Flexible Electronics Japan-Germany International Collaborative Practical Utilization Consortium (YU-FIC)[Oct. 2017～Mar. 2023].
⚫ JST: OPERA Program Grant Number JPMOP1614 [FY2016～FY2020].
⚫ MEXT: Construction Program of Open Innovation Organization [FY2018～FY2022].

Publication⚫ T. Furukawa, J. Hauptmann, T. Nakagaki, R. Ikeuchi, M. Sagawa, D. Nagata, J. Nakatsuka, IDW’21, FLX5/FMC6-1 (2021).
“Roll-to-Roll Fabrication for OLED Lighting Using Ultra-Thin Glass Substrate and Encapsulating Stainless Steel Foil”⚫ M. Natsuka, Y. Ono, H. Mataki, S. Usui, H. Suzuki, M. Abe, T. Furukawa, IDW’21, FLX5/FMC6-2 (2021).
“Protection of OLED Lighting with Ultra-Thin Glass by Special Silicone Gel”

11

Research Group for Flexible Technologies (Nakada/Furukawa/Yuki/Koden)
Developed
technology

YU-FIC

Flexible OLEDs on
Stainless Steel Foil or Barrier Film

We develop flexible OLED devices on stainless steel foil of NIPPON STEELCORPORATION GROUP or PEN film of Teijin.
Technological features◼ Stainless steel foils of NIPPON STEEL◼ PEN or PET film
CORPORATION GROUP
・Roll-to-roll (R2R) CVD for barrier layer
・Thickness: 50μm or 30mm
・High gas barrier: WVTR～10-6g/m2/day
・Excellent surface smoothness（Ra～0.6nm）（WVTR: Water Vapor Transmission Rate）
・Excellent temperature and process resistances
・High gas barrier ability

Developed technologies◼ Stainless steel foil
・Reflective electrode fabrication by Roll-to-roll (R2R) photolithography-free processes
・Prototype flexible OLEDs on stainless steel foil・Laminating encapsulation with stainless steel foil for improving mechanical strength of flexible
OLED devices on ultra-thin glass◼ Barrier film
・Roll-to-roll (R2R) fabrication of single layer barrier and transparent electrode on flexible film・Prototype flexible OLEDs on barrier film

Collaboration

TEIJIN LIMITED, NIPPON STEEL Chemical & Material Co., Ltd.,
Nippon Electric Glass Co., Ltd., Mitsuboshi Diamond Industrial Co., Ltd.,FUJIKURA KASEI CO., LTD., tesa tape K.K.

Related program⚫ Yamagata University Flexible Electronics Japan-Germany International Collaborative Practical Utilization
Consortium (YU-FIC) [Oct. 2017～Mar. 2023].
⚫ MEXT: Construction Program of Open Innovation Organization [FY2018～FY2022].

Publication⚫ K. Taira, Taiga Suzuki, W. Konno, H Chiba, H. Itoh, M. Koden, T. Takahashi, T. Furukawa, IDW’18, FLX2-4L (2019).
“Development of High Gas Barrier Film Using Novel Precursor by Roll to Roll PECVD”⚫ T. Suzuki, W. Konno, K. Taira, H Chiba, H. Itoh, M. Koden, T. Takahashi, T. Furukawa, IDW’18, FLXp1-10L (2019).
“High Gas Barrier Films with Heterogeneous Multilayer”⚫ K. Taira, T. Furukawa, N. Kawamura, M. Koden, T. Takahashi, IDW’17, FLXp1-8L (2018). “High gas barrier film for OLED”⚫ T. Furukawa, N. Kawamura, M. Koden, H. Itoh, H. Kuroiwa, K. Nagai, LOPEC (2017). “Gas barrier film for OLED devices”⚫ Y. Hagiwara, T. Furukawa, T. Yuki, S. Yamaguchi, N. Yamada, J. Nakatsuka, M. Koden, H. Nakada, IDW’17, FLXp1-9L (2017).
“Roll-to-Roll Patterning of Reflective Electrode on Planarized Stainless Steel Foil”⚫ M. Koden, T. Furukawa, T. Yuki, H. Kobayashi, H. Nakada, IDW/AD’16, FLX3-1 (2016).
“Substrates and Non-ITO Electrodes for Flexible OLEDs”⚫ Y. Hagiwara, H. Itoh, T. Furukawa, H. Kobayashi, S. Yamaguchi, N. Yamada, J. Nakatsuka, M. Koden, H. Nakada, IDW/AD’16,
FLXp1-5 (2016). ”Roll-to-Roll Processing of Silver/ITO Continuous Deposition on Planarized Stainless Steel Foil”

12Research Group for Flexible Technologies (Nakada/Furukawa/Yuki/Koden)
Developed
technology

YU-FIC

Roll-to-Roll (R2R) Fabrication ofBarrier Film with Transparent ElectrodeWe develop fabrication technologies of gas barrier layer and transparent electrode on
flexible films, using roll-to-roll (R2R) depositions, which are PE-CVD (Plasma Enhanced
Chemical Vapor Deposition) and sputtering.
Technological features◼ Roll-to-roll (R2R) PE-CVD deposition of gas barrier layer on flexible films◼ High barrier ability with WVTR (Water Vapor Transmission Rate) of the order of 10-6g/m2/day◼ High gas barrier films with transparent electrode

Developed technologies◼ Roll-to-roll (R2R) photolithography-free fabrication of barrier layer
and transparent electrode on flexible films
Wax

R2R processes of barrier layer and transparent electrodeR2R vacuum deposition
Equipment （KOBELCO）（Teijin）

R2R
PEN film

Wetcleaning

CVD of SiOx
barrier layer

R2R screen printing equipment（SERIA ENGINEERING）

IZO
sputtering

Printing of
etching pasteWetcleaning

R2R wet-cleaning equipment（FEBACS）

Al (1mm)

Ca testCutting

OLED

Ca (100nm)
IZO
SiOx barrier layer
Flexible substrate

Flexible film
Barrier layer
Barrier resin
CathodeOrganic layers(plural layers)

IZO
SiOx barrier layer
PEN film◼ High gas barrier property: WVTR = 6.3×10-6g/m2/day

Ca corrosion device after 616 hours
under 40℃/90%RH(Thickness of barrier layer: 720nm)

Collaboration

Cross section of barrier layer

CVD deposition mechanism

TEIJIN LIMITED, Tosoh Corporation, MORESCO Corporation

Related program⚫ Yamagata University Flexible Electronics Japan-Germany International Collaborative Practical Utilization
Consortium (YU-FIC) [Oct. 2017～Mar. 2023].
⚫ MEXT: Construction Program of Open Innovation Organization [FY2018～FY2022].

Publication⚫ K. Taira, Taiga Suzuki, W. Konno, H Chiba, H. Itoh, M. Koden, T. Takahashi, T. Furukawa, IDW’18, FLX2-4L (2018).
“Development of High Gas Barrier Film Using Novel Precursor by Roll to Roll PECVD”⚫ T. Suzuki, W. Konno, K. Taira, H Chiba, H. Itoh, M. Koden, T. Takahashi, T. Furukawa, IDW’18, FLXp1-10L (2018).
“High Gas Barrier Films with Heterogeneous Multilayer”⚫ K. Taira, T. Furukawa, N. Kawamura, M. Koden, T. Takahashi, IDW’17, FLXp1-8L (2017). “High gas barrier film for OLED”⚫ T. Furukawa, N. Kawamura, M. Koden, H. Itoh, H. Kuroiwa, K. Nagai, LOPEC (2017). “Gas Barrier Film for OLED Devices”

13Developed
technology

YU-FICIn-Mold Electronics (IME) Technology

We develop novel in-mold electronics (IME) technologies, molding functional components,
printed electrodes on flexible substrates.
Technological features◼ 3D-molding technologies with electrodes◼ Process simplification in fabrication of
circuit board by printing technologies

Applications◼ Sensors (agricultural sensors, in-water sensors, etc.)◼ Automotive interiors (lighting, controller, etc. of
instrument panels and consoles)◼ Thin IoT devices

Developed technologies◼ 3D-shaped prototype with touch screen and LEDs

JPCA Show 2021
(Tokyo)◼ Agricultural sensor / Verification test・Applied to agricultural sensors of Nishimu Electronics Industries
・Verification test in Paddy fields of Yonezawa city andTome city.

Collaboration

Related program

Aiwa Lite Corporation, The Japan Steel Works, LTD., TEIJIN LIMITED,FUJIKURA KASEI CO., LTD., Nishimu Electronics Industries Co., Ltd.
⚫ Yamagata University Flexible Electronics Japan-Germany International Collaborative Practical Utilization
Consortium (YU-FIC) [Oct. 2017～Mar. 2023].
⚫ MEXT: Construction Program of Open Innovation Organization [FY2018～FY2022].

Publication⚫ Y. Kawamura, T. Takahashi, T. Furukawa, ICFPE 2021, 2Rm401-08-02 (2021). “Student Oral Presentation Award”“Improvement of printed electrodes disconnection after 3D thermoforming by optimizing print process on PC film”⚫ Y. Kawamura, T. Takahashi, K. Wakabayashi, H. Hirose, Y. Azakami, H. Itoh, T. Furukawa, IDW’20, FLX3-04L (2020).
“Effect of Pressure Forming Conditions on PC Sheet integrating Electric Wiring for 3D Electronics Technology”⚫ 山形大学； 「有機デバイス総合展」（2021.10 / 東京ビッグサイト）.
⚫ 山形大学； 「JFlex2020展」（2020.1 / 東京ビッグサイト）, 「JFlex2021展」（2020.12 / オンライン）.

14

Research Group for Flexible Technologies (Nakada/Furukawa/Yuki/Koden)
Developed
technology

Mechanism analysis ofelectrode disconnection in 3D thermoforming

We study on https://sid.onlinelibrary.wiley.com/toc/21680159/2008/39/1processes.
Processes

Screen printing
equipment

3D thermoforming
equipment

3D thermoforming process

Thermoforming experiments

Printing of conducting paste on plastic sheet

Thermoforming

Relationship between deformation degreeof substrate and electrical resistanceMechanism of electrode disconnection
Collaboration
Related program

TEIJIN LIMITED, FUJIKURA KASEI CO., LTD.
⚫ Yamagata University Flexible Electronics Japan-Germany International Collaborative PracticalUtilization Consortium (YU-FIC) [Oct. 2017～Mar. 2021].
⚫ JST: OPERA Program Grant Number JPMOP1614 [FY2016～FY2020].
⚫ MEXT: Construction Program of Open Innovation Organization [FY2018～FY2022].

Publication⚫ Y. Kawamura, T. Takahashi, T. Furukawa, ICFPE 2021, 2Rm401-08-02 (2021). “Student Oral Presentation Award”“Improvement of printed electrodes disconnection after 3D thermoforming by optimizing print process on PC film”⚫ Y. Kawamura, T. Takahashi, K. Wakabayashi, H. Hirose, Y. Azakami, H. Itoh, T. Furukawa, IDW’20, FLX3-04L (2020).
“Effect of Pressure Forming Conditions on PC Sheet integrating Electric Wiring for 3D Electronics Technology”

15Research Group for Flexible Technologies (Nakada/Furukawa/Yuki/Koden)
Developed
technology

YU-FIC

Application of organic electronics
technologies to interactive advertisement

We develop flexible OLED devices for packages, etc., aiming at the application of organic
electronics products to advertisement.
Technological features◼ Flexible OLED packages for various applications◼ Applied to package, advertisement, souvenir, name plate, bookmark, etc.

Developed technologies

Etching of transparent electrode(common pattern)

Collaboration

Printing of certain design

KOMORI Corporation, TAKEDA PRINTING CO., LTD.,
Taica Corporation

Related program⚫ Yamagata University Flexible Electronics Japan-Germany International Collaborative Practical Utilization Consortium (YU-FIC)[Oct. 2017～Mar. 2023].
⚫ MEXT: Construction Program of Open Innovation Organization [FY2018～FY2022].

16

Research Group for Flexible Technologies (Nakada/Furukawa/Yuki/Koden)
Developed
technology

YU-FLEC

Non-ITO Transparent Electrodewith Implanted Metal-mesh Structure

ITO (Indium Tin Oxide), which is the most common transparent electrode in LCDs and
OLEDs, has issues in cost, productivity, etc.
We develop OLED devices using a non-ITO transparent electrode with novel implanted
metal-mesh structure fabricated by Toyo Aluminium.
Technological features◼ Non-ITO transparent electrode with implanted metalmesh structure fabricated by Toyo Aluminium K.K.
・High conductivity led by Al-mesh or Cu-mesh
・Smooth surface due to the implanted metal-meshelectrode into resin
・Applicable to OLED, OPV, etc.
・Applicable to flexible devices

Sheet resistanceITO（on glass）～10Ω/□ITO（on film）～40Ω/□Al mesh (thickness: 15mm)

0.036Ω/□Cu mesh (thickness: 15mm)

0.023Ω/□Fabrication process of metal-mesh substrate

Developed technologies◼ OLED devices using non-ITO transparent electrodewith implanted metal-mesh electrode・Comparative performance with normal ITO
electrode

Collaboration◼ OLED device samples with implanted
metal-mesh electrodeToyo Aluminium K.K., Prof. Takeshi Sano (INOEL, Yamagata University)

Related program⚫ Yamagata University Flexible Electronics Consortium for Academia-Industry Cooperation (YU-FLEC) [Jan. 2018～Mar. 2023].
⚫ JST: OPERA Program Grant Number JPMOP1844 [FY2018～FY2022].
⚫ MEXT: Construction Program of Open Innovation Organization [FY2018～FY2022].

Publication⚫ M. Koden, N. Kawamura, T. Yuki, H. Nakada, R. Waguri, K. Den, R. Nakao, H. Minamiyama,
The 31th Meeting of Japan OLED Forum, S7-2 (2020).
⚫ R. Waguri, K. Den, R. Nakao, H. Minamiyama, MES2020, 1B1-2 (2020).
⚫ Yamagata University； “JFlex2020” (Jan. 2020 / Tokyo), “TCTJAPAN” (Jan. 2020 / Tokyo, “JFlex2019” (Jan. 2019 / Tokyo).
⚫ Toyo Aluminium; Japan Chemical Daily (20 Jan. 2020), Japan Metal Daily (18 Mar. 2020).
⚫ R. Waguri, Toyal Technical Report (2019).
⚫ Toyo Aluminium; “INTERNEPCON Japan” (Jan. 2020, Jan. 2019 / Tokyo).

17

Research Group for Flexible Technologies (Nakada/Furukawa/Yuki/Koden)

TFE (Thin Film Encapsulation)
Technologies for OLEDs

Developed
technology

YU-FLECWe develop TFE (Thin Film Encapsulation) technologies for OLED devices, using organic
resins developed by TOYOCHEM CO., LTD. (TOYO INK SC HOLDINGS group).
Technological features
Inorganic barrier layer (SiNx)
Organic resin (Toyo Ink)
Inorganic barrier layer (SiNx)
Cathode◼ Advantages of “Non-solvent UV-IJ resin ink”
developed by TOYOCHEM”
・To support SiNx barrier layer
・UV cure type (non-solvent)・Applicable to ink-jet

TFE (Thin Film
Encapsulation)

Organic layers(plural layers)
Insulator

Barrier layer

Flexible PI substrate
Anode

Developed technologies

TFT-circuit/bass-line

Insulator

Image of OLED with TFE◼ TFE structure with high gas barrier property
・TEF with “Non-solvent UV-IJ resin ink”
developed by TOYOCHEM・ No actual damage after storage test of 1,000
hours under 40℃/90%RH
・WVTR (Water Vapor Transmission Rate):order of 10-6g/m2/day (40℃/90%RH)◼ OLED device with thedeveloped TFE structure

Ca corrosion test
(40℃/90%RH)
1,030HWVTR (g/m2/day)

1.E-01
1.E-02
Organic resin: reference

1.E-03

1,030H

1.E-04
1.E-05
1.E-06

Organic resin: developed

1.E-070

Collaboration

200

400 600 800 1000 1200
Storage time (hour)

TOYOCHEM CO., LTD.

Related program⚫ Yamagata University Flexible Electronics Consortium for Academia-Industry Cooperation (YU-FLEC) [Jan. 2018～Mar. 2023].
⚫ MEXT: Construction Program of Open Innovation Organization [FY2018～FY2022].

Publication / Commercialization⚫ Yamagata University； “JFlex2020” (Jan. 2020 / Tokyo); “JFlex2019” (Jan. 2019 / Tokyo).
⚫ The developed results have been applied to LIORESIT™ NSP 800 series (UV Curing/ IJ printing) of TOYOCHEM CO., LTD.

18

Research Group for Flexible Technologies (Nakada/Furukawa/Yuki/Koden)

OnDemand Patterning of OLEDs
by Ink-jet Printed Insulators

Developed
technology

YU-FLEC

OnDemand patterning of OLEDs was developed by on-demand pattens of insulators
fabricated by ink-jet printing. The developed technology can be applied to small lot
OLED productions with various designs, inducing novel applications.
Technological features＜OnDemand ink-jet patterning of insulators＞◼ Ink-jet printing of insulators
・simple and inexpensive processes
・On-Demand design(small lot with various designs)
・Eco-friendly (small volume of waste liquid)＜Current method with photosensitive resists＞
・Suppression of contamination
・High resolution but complicated (expensive)(Non-contact between substrates and masks) ・Inadequate for on-demand production because of photomasks◼ LIORESIT™ NSP 800 of TOYOCHEM CO.,LTD.
・UV curing transparent insulation material
・Printable with IJ printer・Curable with 365～395nm UV light・No solvent included[*] TOYOCHEM CO., LTD. is a wholly owned subsidiarycompany of Toyo Ink SC Holdings Co., Ltd.

Developed technologies◼ OLED devices with On-Demand patterns of insulators printed by ink-jet
・Uniform emission including with edges of insulators
・Comparable characteristics and lifetime with OLEDs without the insulators
・Resolution: L/S=61/62mm (almost comparable with 400dpi)

Collaboration

TOYOCHEM CO., LTD.

Related program⚫ Yamagata University Flexible Electronics Consortium for Academia-Industry Cooperation (YU-FLEC) [Jan. 2018～Mar. 2023].
⚫ MEXT: Construction Program of Open Innovation Organization [FY2018～FY2022].

Publication⚫ M. Sugimoto, Y. Fukuchi, H. Tsuruta, M. Koden, H. Nakada, T. Yuki, A-COE 2021, PA-17 (2021).
“OLEDs with on-demand patterns drown by ink-jet printing”

19Research Group for Flexible Technologies (Nakada/Furukawa/Yuki/Koden)

Barrier layer by ALD(Atomic Layer Deposition)

Developed
technology

ALD (Atomic Layer Deposition) can fabricate barrier layers with excellent surface
coverage and can be applied flexible electronics devices.
We provide high gas barrier layers using ALD method for applying various collaborations
on flexible organic electronics.
Technological features◼ Excellent surface coverage by ALD◼ High gas barrier property by multi-layer
structure with SiNx.
WVTR: order of 10-6/g/m2/day(WVTR: Water Vapor Transmission Rate)◼ Equipment：ALD of SUGA CO., Ltd.
(Maximum substrate size: 10cm×10cm)

Developed technologies

ALD equipment (SUGA CO., Ltd.)◼ Multi-layered barrier with Al2O3(ALD) and SiNx (Sputtering) layers
WVTR: order of 10-6/g/m2/day
1.E+00WVTR (g/m2/day)

Glass substrate
Wax
Al (1mm)
Ca (100nm)
SiNx (Sputtering) 200nm
Al2O3 (ALD) Xnm
SiNx (Sputtering) 200nm
PEN film (125mm)

SiN(200nm)/Al2O3(30nm)/SiN(200nm)

1.E-01
1.E-02

SiN(200nm)/Al2O3(60nm)/SiN(200nm)

1.E-03

SiN(200nm)/Al2O3(90nm)/SiN(200nm)

1.E-04

1.E-05
1.E-06
1.E-07
0

200

400

600

800

1000

1200

Storage time (Hour) at 40℃/90%RH

WVTR (Water Vapor Transmission Rate) measurement by Ca corrosion method◼ OLED devices with Al2O3 layers deposited by ALD

Related program⚫ Yamagata University Flexible Electronics Consortium for Academia-Industry Cooperation (YU-FLEC) [Jan. 2018～Mar. 2023].
⚫ MEXT: Construction Program of Open Innovation Organization [FY2018～FY2022].

20

Research Group for Flexible Technologies (Nakada/Furukawa/Yuki/Koden)High Temperature Tolerant
Barrier Films for Flexible OLEDs

Developed
technology

YU-FLEC

OLED fabrication often requires high temperature processes (higher than 200℃).
From this point of view, we develop high temperature tolerant barrier films for flexible
OLEDs, using EXPEEK® film developed by KURABO.
Technological features◼ Advantages of high temperature tolerant film EXPEEK(KURABO INDUSTRIES LTD.)・Biaxially stretched PEEK (polyetheretherketone) film
・Similar temperature tolerance to polyimide(Tg：320℃)
・Excellent solvent tolerance
・Excellent transparency
・Low thermal shrinkage◼ Application of EXPEEK with gas barrier layer to flexible
OLED devices

Fundamental moiety of PEEKEXPEEK(KURABO INDUSTRIES)

Developed technologies◼ High gas barrier property:
WVTR with order of 10-5～10-6g/m2/day◼ Flexible OLED devices

WVTR (Water Vapor Transmission Rate) measurement by Ca corrosion method

Collaboration

KURABO INDUSTRIES LTD.

Related program“JFlex2020”(Oct. 2020 / Tokyo)⚫ Yamagata University Flexible Electronics Consortium for Academia-Industry Cooperation (YU-FLEC) [Jan. 2018～Mar. 2023].
⚫ MEXT: Construction Program of Open Innovation Organization [FY2018～FY2022].

Publication⚫ T. Yuki, T. Nishikawa, M. Sugimoto, H. Nakada, M. Koden, ITE Trans. on MTA Vol. 9, No. 4, pp. 216-221 (2021).
“High Temperature Tolerant Barrier Films with Stacking Barrier Layers by Sputtering and ALD”
⚫ T. Yuki, T. Nishikawa, M. Sugimoto, H. Nakada, M. Koden, IDW’20, FLX2-3 (2020).
“High Temperature Tolerant Barrier Film with Stacking Barrier Layers by Sputtering and ALD”
⚫ Yamagata University； “JFlex2020” (Jan. 2020 / Tokyo); “JFlex2019” (Jan. 2019 / Tokyo).
⚫ KURABO; “7th Fine Plastic Exhibition” (Dec. 2018 / Tokyo), “SEMICON Japan 2018” (Dec. 2018 / Tokyo).

EXPEEK® is a registered trademark of KURABO INDUSTRIES LTD.

21

Research Group for Flexible Technologies (Nakada/Furukawa/Yuki/Koden)
Developed
technology

Printed Flexible Organic Photovoltaic(OPV) Fabricated by Roll-to-roll Processes

By the collaboration with MORESCO Corporation, we developed a roll-to-roll (R2R) process
technology for printing-type flexible Organic Photovoltaics (OPVs).
The develop devices are being evaluated by the verification test of the technology.
Features of flexible OPV◼ can be applied to windows etc. due to the transparent feature.
◼ thin, light weight and un-breakable due to flexible and film
◼ applied to various places such as windows, walls, etc. by double-sided tape etc.

Technological features◼ Fabricated by roll-to-roll (R2R) printing◼ Width:30cm、Length>1m◼ Fabrication processes
1) Transparent electrode (TCO)
deposition
2) TCO patterning3) Cleaning of substrate
4) Printing of ETL（R2R）
5) Printing of active layer（R2R）
6) Printing of HTL（R2R）
7) Printing of electrode（R2R）
8) Current collection9) Encapsulation

Structure of flexible OPV

Developed technologies◼ Roll-to-roll (R2R) printing
technologies of flexible OPV◼ Verification test:

1) Laminate flexible OPVs on windowsof 2nd flour2) Measure and transmit the data of voltage,current, temperature and sunshine byusing the generated power.
3) Display the measured data on a monitor
of 1st flour.

OPVs of MORESCO

Shopping street(March 2018)

Collaboration
Related program
Publication“OPTree” at KOBE ANIMAL
KINGDOM(Oct. 2020)

Verification test at INOEL of Yamagata University

JR East TokyoYard Building(Sep.2021）“Tapestry” （designing by printing on OPV）

MORESCO Corporation⚫ JST: OPERA Program Grant Number JPMOP1614 [FY2016～FY2020].
⚫ MEXT: Construction Program of Open Innovation Organization [FY2018～FY2022].
⚫ Yamagata University； “JFlex2020” (Jan. 2020 / Tokyo).
⚫ Yamagata University; “PVEXPO 2021” (March 2021 / Tokyo & Online).
⚫ Yamagata University； Press Release (6 Nov. 2019).
⚫ MORESCO； Press Release (6 Nov. 2019).

22

Research Group for Flexible Technologies (Nakada/Furukawa/Yuki/Koden)

PSA Encapsulating Technologies
for OLEDs

Developed
technology

YU-FLEC

We collaborate with MORESCO Corporation, aiming at the development of flexible OLED
devices with their PSA (Pressure Sensitive Adhesive) film.
Technological features＜Unique features of PSA film of MORESCO＞■ Hot-melt type
Flexible substrate■ Simple encapsulation process
Barrier layer■ Excellent flexibility
PSA material■ Excellent adhesion (barrier layer)
OLED layer■ High gas barrier
Barrier layer■ Solvent freeFlexible substrate

Pressure

Developed technologies■ Flexible OLED devices with PSA encapsulation

Flexible substrate
Barrier layer
PSA barrier resin
Al2O3 (60nm) by ALD
CathodeOrganic layers(plural layers)
ITO
Barrier layer
Flexible substrate

Collaboration

MORESCO Corporation

Related program⚫ Yamagata University Flexible Electronics Consortium for Academia-Industry Cooperation (YU-FLEC) [Jan. 2018～Mar. 2023].
⚫ JST: OPERA Program Grant Number JPMOP1614 [FY2016～FY2020].
⚫ MEXT: Construction Program of Open Innovation Organization [FY2018～FY2022].

Publication⚫ Yamagata University； “JFlex2020” (Jan. 2020 / Tokyo).

23

フレキシブル基盤技術研究グループ（仲田/古川/結城/向殿研究グループ）
技術成果

Spray Coating
Spray coating technology for organic electronics devices are developed.
OLED devices fabricated by spray coating gave uniform emission andcomparable characteristics with those fabricated by spin coating.
Technological features◼ Uniform coating on large substrates
Developed technologies◼ Applied to OLED devices
・ Uniform emission
・ Comparable characteristics with those fabricated by spin coating

Spray equipment

Lifetime

I-V characteristics

L-I characteristics

OLED devices fabricated using spray coating24フレキシブル基盤技術研究グループ（仲田/古川/結城/向殿研究グループ）
技術成果

Optical simulation
Optical simulation is very useful in device architecture of OLED devices.
We develope optical simulation technologies for practical OLED devices.
Technological features◼ The developed optical simulation technologies of OLED devices can contribute to accuracy
and efficiency of R&D in conjunction with our rich experiences on actual OLED devices.
◼ Software; Fluxim Setfos (Cyber Net Inc. ), etc.

Developed technologies◼ Optical simulation of OLED device architecture with a mirror plane and a
micro-cavity layer with faint-reflecting Ag anode・Optical simulation of optimized light emitting profile of OLED devices with a dielectric
mirror with high reflective index and a micro-cavity layer with faint-reflecting Ag anode・Application of a Nb2O5 layer as high reflective index layer
・The thicknesses of SiO2 and HTL were optimized for maximizing light emitting energy.
Emission spectra (a.u.)

Experimental PL data of a solution with emission material
OLED light emitting calculated by device simulation
OLED light emitting of actual OLED device

1) Measure PL (photo luminescent) intensity of a dilute
solution with a low concentration of emitting material.
2) Estimate optimized device architecture of OLED
devices with a dielectric mirror by using the device
simulation with obtained PL spectrum.
3) Compare the simulated results with thecharacteristics of actual devices for contributing
accuracy and efficiency of research.

Wavelength (nm)An example of comparison of an actual device and a simulationof one layer of dielectric mirror with high reflective index and a
micro-cavity layer with faint-reflecting Ag anode.

◼ Spectra simulation of OLED devices with different thickness of oeganic layers
・Simulation of OLED emission spectra dependence on thickness of hole injection layer(HIL) in OLED devices.
・ Excellent consistency between simulations and experimental results.

Device simulation

Experimental result25Research Group for Flexible Technologies (Nakada/Furukawa/Yuki/Koden)
Developed
technology

Analysis of defects, failures, structures, etc.

We contribute to practical device technologies by using various analysis such as analysis ofdefects failures, structures, etc..
Technological features◼ Optical microscope◼ Film thickness measurement apparatus◼ Digital microscope◼ Emission microscope◼ AFM (Atomic Force Microscope) ◼ Ionization potential measurement apparatus, etc.

Analysis example 1◼ Assignment of defect point by emission microscope・Assignment of defect point
・Investigation of cause of defects by combining with
optical microscope, FE-SEM, etc.
【Measurement principle】
・System: optical microscope and high sensitive camera
・Supersensitive camera can detect emission induced by
hot carrier generated by applying voltage.
・Emission point can be detected by combining emission
image and reflective image.
Leak by penetration of
TFE resin to organic layerof OLEDa) Detection of defects by emission microscopeb) Observation of leak point by confocal microscopy

Analysis example 2

Analysis example 3◼ Observation by digital microscope
・Tiling of plural images
・Observation with magnification of 42～5600
・Various types of observation(BF, focal illumination, DF, BF+DF、polarized
illumination, differential interference）◼ Ionization potential (IP) measurement
・Measurement method:
Photoelectron Yield Spectroscopy (PYS)(Example)
Ionization potential measurement of a novel material.

Observation of ink-jet printed pattern

26

Research Group for Flexible Technologies (Nakada/Furukawa/Yuki/Koden)

Topics / Publications
Award➢H. Nakada, M. Koden, “Award from Minister of State for Science andTechnology Policy”, Cabinet Office, Government of Japan, (2017).

Book➢ M. Koden, “OLED Displays and Lighting” (Wiley, IEEE Press) (2017).
➢ M. Koden, T. Furukawa, T. Yuki, H. Nakada, Springer Link “Handbook of
Organic Light-Emitting Diodes” (2020). “Transparent Electrodes”

Paper➢ T. Yuki, T. Nishikawa, M. Sugimoto, H. Nakada, M. Koden, ITE Trans. on MTA Vol. 9, No. 4, pp. 216-221 (2021).
“High Temperature Tolerant Barrier Films with Stacking Barrier Layers by Sputtering and ALD”
➢ T. Furukawa, M. Koden, IEICE Trans. Electron, E100-C, 949-954 (2017).
“Novel roll-to-roll deposition and patterning of ITO on ultra-thin glass for flexible OLEDs”

International Conference➢ T. Furukawa, J. Hauptmann, T. Nakagaki, R. Ikeuchi, M. Sagawa, D. Nagata, J. Nakatsuka, IDW’21,FLX5/FMC6-1(2021).
“Roll-to-Roll Fabrication for OLED Lighting Using Ultra-Thin Glass Substrate and Encapsulating Stainless Steel Foil”➢ M. Natsuka, Y. Ono, H. Mataki, S. Usui, H. Suzuki, M. Abe, T. Furukawa, IDW’21, FLX5/FMC6-2 (2021).
“Protection of OLED Lighting with Ultra-Thin Glass by Special Silicone Gel”
➢ Y. Kawamura, T. Takahashi, T. Furukawa, ICFPE 2Rm401-08-02 (2021).
“Improvement of printed electrodes disconnection after 3D thermoforming by optimizing print process on PC film”➢ M. Sugimoto, Y. Fukuchi, H. Tsuruta, M .Koden, H. Nakada, T. Yuki, A-COE 2021, PA-17 (2021).
“OLEDs with on-demand patterns drown by ink-jet printing”➢ M. Koden, M. Sugimoto, N. Kawamura, T. Yuki, H. Nakada, AM-FPD21, 3-1 (2021). [Invited]“Novel Flexible Films with High Gas Barrier Layers by Sputtering and ALD”
➢ T. Yuki, T. Nishikawa, M. Sugimoto, H. Nakada, M. Koden, IDW’20, FLX2-3 (2020).
“High Temperature Tolerant Barrier Film with Stacking Barrier Layers by Sputtering and ALD”
➢ Y. Kawamura, T. Takahashi, K. Wakabayashi, H. Hirose, Y. Azakami, H. Itoh, T. Furukawa, IDW’20, FLX3-04L (2020).
“Effect of Pressure Forming Conditions on PC Sheet integrating Electric Wiring for 3D Electronics Technology”➢ T. Nakagaki, T. Kawabata, H. Takimoto, T. Furukawa, IDW’19, FLXp1-9L (2019).
“Scribing Tool and Cutting Method for Ultra-thin Glass”➢ K. Taira, T. Suzuki, W. Konno, H Chiba, H. Itoh, M. Koden, T. Takahashi, T. Furukawa, IDW’18, FLX2-4L (2018).
“Development of High Gas Barrier Film Using Novel Precursor by Roll to Roll PECVD”➢ T. Furukawa, N. Kawamura, T. Noda, Y. Hasegawa, D. Kobayashi, M. Koden, IDW’17, FLX6-2 (2017).
“Novel Roll-to-Roll Fabrication Processes of Transparent Electrodes on Ultra-Thin Glass”

Exhibitions➢ “CEATEC 2021” (Oct. 2021).
➢ “JFlex” (Jan. 2019, Jan. 2020, Dec. 2020).
➢ “Printable Electronics” （2014, 2015, 2015, 2016, 2017, 2018）.
➢ “LOPEC” （2018, 2019 / Germany）.
➢ “Flex Japan 2019” （May 2019）.
➢ “LED & OLED EXPO 2017” （Jun. 2017 / Korea）.
➢ “G7 Exhibition” (May 2016).
➢ “International Photonics Exhibition 2015” （Oct. 2015 / Korea）.

Printable Electronics
2017 Award

JFlex Award(2019, 2020)“LOPEC” (Mar. 2019, Germany)“International Photonics Exhibition
2015” (October 2015, Korea)“JFlex 2020”(Jan. 2020, Tokyo)

27“Flex Japan 2019”(May 2019, Tokyo)

Research Group for Flexible Technologies (Nakada/Furukawa/Yuki/Koden)

Main Members
Professor, Director for Organic Electronics

Professor

Hitoshi Nakada

Dr. Mitsuhiro Koden

nakada@yz.yamagata-u.ac.jp
Field: Organic electronics devices

koden@yz.yamagata-u.ac.jp
Field: LCD, OLED, Chemistry

1981
Graduated at Tohoku University
1981～2013 Pioneer Corporation
1988～
R&D of OLED display and OLED lighting
2013～
INOEL, Yamagata University (current position)

1983
Graduated at Osaka University (PhD)
1983～2012 Sharp Corporation(Liquid crystal materials, LCD, OLED display, etc.)
1998～2011 Guest prof. of Nara Institute of Science and Technology
2012～
INOEL, Yamagata University (current position)(Award)・Award from Minister of State for Science and Technology Policy”, Cabinet
Office, Government of Japan (2017).
・Optoelectronics Industry and Technology Development Association,
19th Kenjiro-Sakurai Memorial Award (2003).
・47th Okochi Memorial Award (2000).
(Development)
・World’s first OLED product (passive-matrix OLED display) (1997).
・World’s first phosphorescent OLED product (2003).
・Passive-matrix full-color flexible OLED display prototype (2003).
(Publication)
・M. Sugimoto, Y. Fukuchi, H. Tsuruta, M. Koden, H. Nakada, T. Yuki, A-COE
2021, PA-17 (2021).

(Award)・Award from Minister of State for Science and Technology Policy”, Cabinet
Office, Government of Japan (2017).
・Award from The Japanese Liquid Crystal Society (2005).
(Development)
・17” Ferroelectric liquid crystal display (FLCD) prototype (1999).
・3.6” Polymer OLED display prototype fabricated by ink-jet (2006).
(Book)
・M. Koden, “OLED Displays and Lighting” (Wiley; IEEE Press) (2017).
・K. Takatoh, M. Hasegawa, M. Koden, N. Itoh, R. Hasegawa, M. Sakamoto,“Alignment Technologies and Applications of Liquid Crystal Devices” Taylor& Francis (2005).

Associate Professor

Associate Professor

Tadahiro Furukawa

Dr. Toshinao Yuki

ta-furukawa@yz.yamagata-u.ac.jp
Field: Fine patterning technology, Printing,Roll-to-roll technology

t-yuki@yz.yamagata-u.ac.jp
Field: OLED (Display, Lighting, Device)
Polymer materials

1984
Graduated at Saitama University (Master degree)
1984～2011 Kyoto Printing Co., Ltd.
R&D and production of Color filter (CF)R&D of flexible CF and LCD
2011～
INOEL, Yamagata University (current position)

1993～1996 Teijin Limited
1996～1999 Graduated at Yamagata University (PhD)
1999～2015 Tohoku Pioneer Corporation(PMOLED, AMOLED, Tiling OLED, OLED lighting, etc.)
2015～
INOEL, Yamagata University (current position)(Papers)
・T. Furukawa et al, IEICE Trans. Electron, E100-C, 949-954 (2017).
(International conference)
・T. Furukawa et al., IDW’21, FLX5/FMC6-1 (2021).
・T. Furukawa, M. Koden, ICDT2019, 55.2 (2019). [China/Invited]
・T. Furukawa, WCAM2018 (2018）. [China/Invited]
・T. Furukawa et al., IDW’17, FLX6-2 (2017).
・T. Furukawa, LED & OLED EXPO 2017 (2017). [Korea]
・T. Furukawa et al., LOPEC (2017). [Germany]
・T. Furukawa et al., IDW/AD’16, FLX3-3 (2016).
・T. Furukawa, IWFPE2016 (2016). [Korea/Invited]
・T. Furukawa, S. Tokito, SID 2015, 4.4 (2015).

(Award)・The 4th Japan OLED Forum Outstanding Achievement Awards (2011).
(Development)
・World’s first phosphorescent OLED product (2003).
・World’s first large size tiling OLED display product (2010).
・World’s first color-tunable OLED lighting product (2013).
(Publication)
・T. Yuki, T. Nishikawa, M. Sugimoto, H. Nakada, M. Koden, ITE Trans. on
MTA Vol. 9, No. 4, pp. 216-221 (2021).

Project Scientist
Miho Sugimoto

Project Scientist
Norifumi Kawamura

Project Scientist
Masanori Abe

m-sugimoto@yz.yamagata-u.ac.jp

n-kawamura@yz.yamagata-u.ac.jp

m-abe@yz.yamagata-u.ac.jp

1999 Graduated at Keio University (Master deg.)
1999～2004 Murata Manufacturing Co., Ltd.
2005～2019 Tohoku Pioneer Corporation
2019～ INOEL, Yamagata University (current position)(Skills)
Film OLED, Encapsulation, Electrode,
Equipment, etc.
(Publication)
・M. Sugimoto, Y. Fukuchi, H. Tsuruta, M. Koden,
H. Nakada, T. Yuki, A-COE 2021, PA-17 (2021).

2001 Graduated at Yamagata University (Master deg.)
2001～2007 IMES Co., LTD
2007～2013 ROHM Co., Ltd. / Lumiotec Inc.
2013～ INOEL, Yamagata University (current position)(Skills)
OLEDs (Device, process, Evaluation)(Publication)
・M. Koden, M. Sugimoto, N. Kawamura, T. Yuki,
H. Nakada, AM-FPD21, 3-1 (2021).

January 2022
Research Group for Flexible Technologies(Nakada/Furukawa/Yuki/Koden Group)
Innovation Center for Organic Electronics (INOEL)
Yamagata University
1-808-48 Arcadia, Yonezawa, Yamagata 992-0119, Japan
TEL +81-238-29-0575
E-mail： nakada@yz.yamagata-u.ac.jp
E-mail： koden@yz.yamagata-u.ac.jp
URL：https://inoel.yz.yamagata-u.ac.jp/F-consortium/home-e.html

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1990～2013 Tohoku Pioneer Corporation2013～ INOEL, Yamagata University (current position)（Skills）
Printing (Screen printing, etc.), Roll-to-roll (R2R),
OLEDs, Encapsulation, Equipment, etc.
(Publication)
・M. Natsuka, Y. Ono, H. Mataki, S. Usui, H. Suzuki,
M. Abe, T. Furukawa, IDW’21, FLX5/FMC6-2(2021).