AISthesis Products

Advanced Imaging Products for Nanotechnology,
Engineering and Life Sciences
PO Box 1950, Clyde NC 28721

Pelcotec

TM

Certificate of Calibration for
Critical Dimension Magnification Standard

Product Number: Pelcotec™ 695-1 CDMS-1C-ISO
Product Description: 2.5x2.5mm, PelcotecTM 2mm1μm Critical Dimension Magnification Standard
Product Serial Number: CD-AI03-1234
As Received Condition: New
As Returned Condition: N/A
Date of Receipt: N/A
The accuracy of this product with Serial Number CD-AI03-0918 was determined using a Field Emission
Scanning Electron Microscope (FE-SEM) by reference comparison to working standards traceable tothe National Institute of Standards and Technology (NIST), using methods in CP 01 FE-SEM Imagingof Critical Dimension Magnification Standards (CDMS) and CP 02 Certification of Critical Dimension
Magnification Standards. The data applies only to the CDMS identified in this report. All results are “asis”. Repair and/or adjustments are not possible.
Below are the ISO 17025:2017 compliant Certified 10 µm Pitch Measurements unique to Serial Number
CD-AI03-1234 and traceable to NIST Certified Standard CD-PG01-0211.
Line

0-10 µm
10-20 µm
20-30 µm30-40 µm
40-50 µm50-60 µm60-70 µm
70-80 µm
SumAverage2-Sigma *Page 1 of 5ISO 17025:2017
CompliantCertified Pitch
10.004 µm
10.000 µm
10.002 µm
10.002 µm
10.004 µm
10.000 µm
10.004 µm
10.002 µm
80.018 µm
10.0023 µm
0.0042 µm

Position ofMeasurement± 7.5 µm from center± 7.5 µm from center± 7.5 µm from center± 7.5 µm from center± 7.5 µm from center± 7.5 µm from center± 7.5 µm from center± 7.5 µm from center* Corrected for sample size using the appropriate Student t-factor.

Measurements are reported with an uncertainty (k=2)** of ± 0.012 µm. Statements of Conformity are
not provided in this report. Review the results and verify that they meet the requirements for theintended use. Physical damage to or contamination of the CDMS occurring after calibration may
invalidate the reported measurements. Use this product at 25օC ± 5օC and at less than 80% RH.
** Reported uncertainties represent expanded uncertainties expressed at approximately the 95%
confidence level using a coverage factor of k = 2. The reported expanded measurement uncertainty is stated as
the standard measurement uncertainty multiplied by the coverage factor K such that the coverage probability
corresponds to approximately 95%.

Line

2.0 mm
1.0 mm
0.5 mm0.25 mm
5.0 µm
2.0 µm
1.0 µmNumberofLines
2222
121617Position of
Measurement± 1.00mm from center± 0.5mm from center± 0.25mm from center± 0.125mm from center± 20 µm from center± 10 µm from center± 5 µm from center

Non-ISO 17025:2017 Compliant
Measured Distance(first to last line)
2.000 mm
1.000 mm0.500 mm
0.250 mm55.057 µm
30.051 µm
16.033 µm

Average Pitch

2.000 mm
1.000 mm0.500 mm
0.250 mm5.005 µm2.001 µm
1.002 µm

The average pitch is derived from the stated length that was determined using measurements (takencenter-to-center) over the stated number of lines (i.e., length divided by the number of lines minus one).
Date of Analysis: January 29th, 2023
Equipment used:
Instrument
FE-SEMModel
FEI Verios
460L

Serial #9922551

Resolution
0.9nm

Repeatability
0.030%

Temperature
22.7 ± 0.3 °C

Humidity
34.5 ±
1.5%

Location: Analytical Instrumentation Facility, NC State University, Raleigh NC 27695-7531.
Notes:Page 2 of 5Ref.
CD-PG010211

D.S. Finch__________
Certified by___________________________
Signature

H. Haehlen
Authorized by___________________________
Signature

January 29th, 2023_ ____
Date report issued.

This certificate shall not be reproduced without the permission of AISthesis Products, Inc.
P.O. Box 1950, Clyde, North Carolina 28721 Tel: 828.627.6555 E-mail: CDMS@aisthesisproducts.com

Non-ISO 17025:2017 Compliant Supplemental Material.

AI03 1234
2.2
2.0
1.8
1.6Measured (mm)1.4

y = 1.000203603162x
R² = 0.999999991547

1.2
1.00.80.6
0.4
0.2
0.000.2

0.4

0.6

0.8

11.2

1.4

1.6

1.8

2Expected (mm)Figure 1. Expected versus actual measurements including all lines with linear regression and R2values reported.

Page 3 of 5

2.2

AI03 1234
1210

Measured (µm)

8y = 1.000409648x
R² = 0.999999887

6420024681012

Expected (µm)

Figure 2. Expected versus actual measurements for the 10μm, 5μm, 2μm and 1μm pitch lines withlinear regression and R2 values reported.

Page 4 of 55 µm Line0-5µm
5-10µm
10-15µm
15-20µm
20-25µm25-30µm30-35µm35-40µm40-45µm45-50µm
50-55µm
SumAverage
2-Sigma *Pitch
5.005 µm
5.005 µm
5.005 µm
5.010 µm
5.010 µm
5.005 µm
5.005 µm
5.003 µm
5.000 µm
5.008 µm
5.000 µm55.057 µm
5.0051 µm
0.0079 µm

2 µm Line
0-2µm
2-4µm
4-6µm
6-8µm
8-10µm10-12µm
12-14µm
14-16µm
16-18µm
18-20µm
20-22µm22-24µm
24-26µm
26-28µm
28-30µm
SumAverage
2-Sigma *Pitch
2.031 µm
2.003 µm2.001 µm
2.003 µm2.001 µm2.001 µm
2.003 µm
1.998 µm
2.003 µm2.001 µm2.001 µm2.001 µm
2.003 µm2.001 µm
2.003 µm
30.051 µm
2.0034 µm
0.0173 µm

1 µm Line
0-1µm
1-2µm
2-3µm
3-4µm
4-5µm
5-6µm
6-7µm
7-8µm
8-9µm
9-10µm10-11µm
11-12µm
12-13µm
13-14µm
14-15µm
15-16µm
SumAverage
2-Sigma *Excluding 1st and last lines
Average1.0017 µm
2-Sigma *0.0026 µm

Excluding 1st and last lines
Average
2.0013 µm
2-Sigma *0.0036 µm

End of report.

Page 5 of 5

Pitch
1.005 µm1.001 µm
1.002 µm
1.002 µm1.001 µm
1.002 µm1.001 µm1.001 µm
1.004 µm1.001 µm
1.000 µm
1.002 µm1.001 µm1.001 µm
1.004 µm
1.004 µm
16.033 µm
1.0021 µm
0.0032 µm