Smart Systems for Industry 4.0
Prof. Dr. Thomas Otto
Director Fraunhofer ENAS
Director Center for Microtechnologies at University of Technology
Chemnitz© Fraunhofer ENAS

Outline

1. Working fields Fraunhofer ENAS
2. Industry 4.0 – general trends
3. Hybrid sensors and sensor systems for Industry 4.0

4. Lighthouse project Go Beyond 4.0
5. Spectroscopy - application in agriculture monitoring
6. Summary© Fraunhofer ENAS

Locations Fraunhofer ENAS
Itzehoe
Rostock
LübeckBremenHannover

Paderborn
Duisburg

Chemnitz

Paderborn
DortmundHalle
Schmallenberg
Schkopau
Sankt Augustin

AachenKaiserslauternmore than 26000 employees© Fraunhofer ENAS

JenaErlangen

Pfinztal

Nürnberg

Stuttgart

72 institutes

DresdenWürzburg

Wertheim

St. Ingbert

CottbusLeipzig

Chemnitz
Darmstadt

Fraunhofer-Gesellschaft

Ilmenau

Euskirchen

Saarbrücken
Karlsruhe

BerlinMagdeburg
Teltow
Nuthetal

Braunschweig
Oberhausen

Potsdam

Freiburg

Efringen-Kirchen

Freising
MünchenHolzkirchen

BerlinMain Working Field - Smart Systems Integration
 Self-sufficient intelligent technicalsystems or subsystems withadvanced functionality

Integr a tion&P acka gin g Bring together sensing, actuationand data processing, informatics /communications
 Autonomous systems
 Highly reliable, often miniaturised,networked, predictive Their operation being further
enhanced by their ability to mutuallyaddress, identify and work in
consort with each other Basic components for Internet ofThings© Fraunhofer ENAS

MEMS /NEMS

Communication
Unit
ElectronicComponents

Core competences Based on the core competences research and development services
starting from idea, via design andtechnology development, realization
based on established technologies, up toprototype or demonstrator (transfer toindustry)

Design and Test of Components and Systems

Fluidic
Integration
Technologies

 High-performance/ high-precision
sensors and actuators
 Microfluidic systems and biosensor
integration
 Printed functionalities

Nano
Integration
Technologies

Printing
Technologies

MEMS
Packagingand
3D Integration
MEMS
Technologies

 Sensors and actuator systems withInterconnect Technologies
control units, integrated electronics,
embedded software and user interface forapplication in different branches
Reliability of Components and Systems© Fraunhofer ENAS

Business Units Three application orientedbusiness unitsTechnologies and systems for

Smart Power and MobilityTechnologies and Systems for

Smart HealthSmartHealth

SmartPowerandMobility

SmartProduction

Technologies and Systems for

Smart Production

 Two business units related totechnologies


Micro and Nanoelectronics

Sensor and Actuator Systems© Fraunhofer ENAS

Microand
Nanoelectronics

SensorandActuator
Systems

Technology-oriented business units

Micro and Nanoelectronics

 Back-End of Line and Interconnects
 Modeling and Simulation
 Beyond CMOS and RF Devices
 Integration and Packaging
 Characterization and Reliability
Sensor and Actuator Systems

 Inertial Sensors
 Pressure and Power Transducer
 Material and Structure Sensors
 Optical Systems/MOEMS Electromagnetic Sensors© Fraunhofer ENAS

Application-oriented business units

Technologies and systems for Smart Power and Mobility Network Monitoring Reduction of Power Consumption Power Supply Electromobility
Technologies and Systems for Smart Health Microfluidic and Spectroscopic Analysis
 Medical Devices
 Implants
Technologies and Systems for Smart Production
 Smart Digital Production
 Sensor Systems for Process andCondition Monitoring© Fraunhofer ENAS

Outline

1. Working fields Fraunhofer ENAS
2. Industry 4.0 – General trends
3. Hybrid sensors and sensor systems for Industry 4.0

4. Lighthouse project Go Beyond 4.0
5. Spectroscopy – application in agriculture monitoring
6. Summary© Fraunhofer ENAS

Smart Systems – Application Fields© Fraunhofer ENAS

© Fraunhofer ENAS

Technologies and Systems for

Smart Production

Automation and Digitizationof Production (Industry 4.0)

Smart digital production
Sensor systems
supportingproduction

Transition to flexible
production
Series production of lot size 1
Digital production

Process control inmechanical engineering Process monitoring Process optimization
 Condition monitoring

Supporting topics
Specific ressources Reliability ofcomponents andsystems
 Wireless data andpower transmission

Individualized products© Fraunhofer ENAS

Seite

Outline

1. Working fields Fraunhofer ENAS
2. Industry 4.0 – general trends
3. Hybrid sensors and senor systems for Industry 4.0

4. Lighthouse project Go Beyond 4.0
5. Spectroscopy – application in agriculture monitoring
6. Summary© Fraunhofer ENAS

Nanocom pos ite Hum idity S ens ors
General: Printable humidity sensors based on polymeric microand nanocomposites
 Very high sensitivity – up to 35 pF / % r.h.
 Response times in the range of 15 - 20 sec(comparable to commercial sensors)

Benefits:
 Low cost – high sensitivity
 Easy production (e.g. printing), also on flexible
substrates
 Easy scale-up / arrangement of multi sensor arraysfor detection of moisture distributions
 Wireless readout capability
Applications: Air humidity determination in buildings,
warehouses, …
 Detection of leakage of containers or packages
 Detection of cracks and water penetration into
lightweight structures
Technology Readiness Level: 4© Fraunhofer ENAS

10 mm
Backstitched screen printed humidity sensors

MEMS fluid s ens orGeneral:Sensor for fluid quality measurement
Viscosity range 5 cP… 100 cP
Density range: 0.65 … 1.50 kg/l
Dielectric constant range: 1.0 … 6.0
Temperature range: -40°C…150°C

Working principle:
 Silicon resonator interacts with the fluid Evaluation of resonant frequency anddamping to determine the fluid properties
Applications:

Oil quality measurement
Chemical industry
Food industry
Test of fuelTechnology Readiness Level: 6© Fraunhofer ENAS

MEMS sensorandelectronics inScreen shot of the userinterfacemechanicaladapter

iS ealGeneral: Integration of autarkic sensors into a shaft
seal to monitor both sealing function,
temperature, rotational speed.
 Intelligent shaft seal is made up ofsubassemblies for sensing, signal
processing, radio transmission, and an
energy converter for autarkic operation

Benefits:
 ensures a trouble-free working of themachine,
 avoids cost-intensive down time or failures

Applications: Online monitoring of shaft seals insidegearbox
 Online monitoring lubricants inside gear box
Technology Readiness Level: 6© Fraunhofer ENASiSeal inside gear box

S tructure-integrated, w ireles s s ens or / actuator
technology in m achine cons truction
General: Sensor ring with integrated force andtemperature measurement: Forces up to 11 kN
 Resolution < 5 N Data Rate 10 SPS

Temperaturesensor

 Vibration sensor:

 Frequency range: 10 Hz to 20 kHz
 Analog and digital signal output
 MEMS sensor and ASIC in one housing
Benefits:

Straingauge

Sensor ring with integrated force andtemperature measurement

 Process-controlled status monitoring inmechanical engineering by structure-integratedwireless sensor technology
Partners:
 ENAS, IWU, IIS/EAS, IPMS, IZM/ASSID, IKTS
Technology Readiness Level: 4© Fraunhofer ENAS

ADC forstraingauges

Vibration sensor

Outline

1. Working fields Fraunhofer ENAS
2. Industry 4.0 - general trends
3. Hybrid sensors and sensor systems for Industry 4.0

4. Lighthouse project Go Beyond 4.0
5. Spectroscopy – application in agriculture monitoring
6. Summary© Fraunhofer ENASFRAUNHOFER LIGHTHOUSE PROJECT 2016
DIGITAL MANUFACTURING IN MASS PRODUCTIONINNOVATION OF SERIES PRODUCTION BY DIGITAL PRINTING AND LASER PROCESSESConsortium:

Fraunhofer Institutefor Electronic Nano Systems ENAS, Chemnitz, consortium leader
for Manufacturing Technology and Advanced Materials IFAM, Bremen
for Laser Technology ILT, Aachen
for Applied Optics and Precision Engineering IOF, Jenafor Silicate Research ISC, Würzburg
for Machine Tools and Forming Technology IWU, Chemnitz and Dresden© Fraunhofer ENAS

Digitalization of production for the individualizationof mass-produced components
Market trends:
 Increasing product diversity with decreasing batch sizes Efficient use of high-quality functional materials
 Intelligent products with integrated data collection, processing and communication
 Further individualization of the product geometry beyond the software-based
customizationurgent need for research of future-proof production strategies

Digital fabrication in mass production… with the aim of networked and highly efficient production with minimal
resource use through digital manufacturing and integration of innovative
functional materials© Fraunhofer ENAS

… the successfull
massproduction conceptof printed flexible hybrid electronics:
Roll-to-Roll printing

Orientation ofthe markets:
Individualization of every massproduced components
 Printing by robot on product© Fraunhofer ENAS

 Fraunhofer ILT

Crosslinked digital functionalization and individualization
technologies within existing production lines
Digitalfunctionnalization:
digital datachange(printpattern) <->product
adaptionsmaterialintake

Integration of one or more

Digital modules
based on digital printing and laser processes
Development of reliability guidelines for the processes

forming separation

joining

coating

State of the art mass production line

© Fraunhofer ENAS

assembling

Benefit:product
adaptions
without
machineset-up time

final checkApplications
DIGITAL MANUFACTURING IN MASS PRODUCTIONINNOVATION OF SERIES PRODUCTION BY DIGITALPRINTING AND LASER PROCESSES„Smart Door“

Trend:

Individualization & functional
enhancement in automotive(40.000 individualized vehicles
per day at VW)

Challenge: Variety of variants with decreasing
batch sizes
Aim: Differentiation and increased efficiency ofthe production by means of printing andlaser technologies demonstrated on printed
conductive paths / cable trees, sensors andcontrol elements of a car door

FraunhoferIWU
ENAS© Fraunhofer
2017

Technology
Digital modules based on digital printing and laser processes

Additiv e m aterial
depos ition

Robotic printing system Fraunhofer ENAS, Chemnitz/Germany© Fraunhofer ENAS

Las er s intering &las er ablation

Robotic laser system Fraunhofer ILT, Aachen/Germany

Printed automotive wiring harness on metalConcept A)
1. Printed automotive wiring harness
on sheet metal
2. Metal forming
material intake

forming

Concept B)
1. Metal forming

2. Printed automotive wiring harness
on 3D metal object
material intake© Fraunhofer ENASforming

Printed automotive wiring harness on metal

Concept A)

Printing  Metal forming (deep drawing)aluminum

Laser etching +dispensing thedielectric ink

10 cm

Stretchability:
up to 20 %Deep drawing +connector mounting+ dielectric coating

Bendability: upto 105°
deep drawing© Fraunhofer ENAS

Printed automotive wiring harness on metal

Concept A)

Printing  Metal forming (deep drawing)© Dr. Ralf Zichner  Fraunhofer ENAS 201827

Printed automotive wiring harness on metal

Concept A)

Resistance in Ω

1. Printed automotive wiring
harness on sheet metal (aluminum)

25 mm

2. Metal forming (stretching)432
100150 mm

Elongation in %up to 180 mm

1 %, 2 %, 4 %, …, 20 %© Dr. Ralf Zichner  Fraunhofer ENAS 2018

102820Outline

1. Working fields Fraunhofer ENAS
2. Industry 4.0
3. Hybrid sensors and sensor systems for Industry 4.0

4. Lighthouse project Go Beyond 4.0
5. Spectroscopy - application in agriculture monitoring
6. Summary© Fraunhofer ENAS

© Fraunhofer ENAS

Analysis by spectroscopy:
Detect the composition of substances!

Source: http://webbook.nist.gov/chemistry© Fraunhofer ENAS

Motivation – infrared spectroscopy for daily use
Large, >10kg, xx k€Small, < 1kg, x k€

Source : https://www.bruker.com/products/infrarednear-infrared-and-raman-spectroscopy/ft-ir-routinespectrometers/tensor/overview.html

Source : http://www.rgbphotonics.com/products/

Ultra small, < 10g, xx €Source: http://www.digitaltrends.com/cooltech/changhong-smartphone-spectrometerces-2017/© Fraunhofer ENAS

Source http://labinyourpocket.com/near-infrared-analysis-by-portable-minispectrometers-and-mobile-phones/

Fabry-Pérot interferometer (infrared spectral range)
General: Electrically tunable MOEMS band-pass filter for

infrared spectral range (3-5 µm, 5-8 µm, 8-11 µm)
Transmittance > 70%
Bandwidth (FWHM): 25-200 nm
Control voltage: 15-60 V
Aperture size: 2x2 mm²Benefits:

Fabry-Pérot Interferometer chip

Detector with integrated FPI

 Small band-pass filter Fits in a TO-8 housing (7 x 7 x 0,6 mm³)
 Low influence of vibration and gravitation on
central wavelength

Applications: Infrared measurement instrumentation
 Spectral gas analysis
 Spectral imaging
Technology Readiness Level: 6© Fraunhofer ENAS

Spectral transmittance of FPI

Two symmetric parts with Bragg reflectors and ARC

New developments and directions:
Emitter based on quantum dots
 Charge carriers with limited mobility and discretestates Optical properties depend on material and size ofthe particles
 Wavelength of emission and of absorption canbe tuned
 High quantum efficiency (EQE: ~ 2 %)Kolloidale Quantum Dots
Source: http://www.sigmaaldrich.com/materials-science/nanomaterials/quantum-dots.html

 QDs in suspension to apply by printing, spin
coating ...

Photoimage of QD-LEDin operation© Fraunhofer ENAS

Applications

 Warning and safety systems
 Gas analyzers in for medical and power
applications

 Raman spectroscopy and ATR sensors forchemical industry and bio-analysis
unmanned vehicles

 Spectral imaging

Drägerwerk AG & Co. KGaA

© Fraunhofer ENAS

www.gasmessung.de Application in handheld devices andwww.gasmessung.de

Spectral imaging of ethanol vapor

network)
Applications: Optimization of crop crow conditions: Photo synthesis,
 Transpiration,
 Stomatal conductance Internal CO2- concentration
 Detection of plant diseases
 Optimum application of fertilizers andBrown rust caused byPuccinia hordei

 Data processing (PCA, neuronal

Net blotch caused by
Pyrenophora teres

hyperspectral signatures

Healthy barley leaf

 Spectral data collection and derivation of

Powdery mildew caused by
Blumeria graminis hordei

Spectral data based detection of plant disease

Source: M. Wahabzada et al., PLOS ONE, DOI: 10.1371/journal.pone.0116902

plant protection chemicals
Reflection spectra of wheat with and without Puccinia striiformis© Fraunhofer ENAS

eGrains system for precision farming and pest control
General: Diagnose system for stress and

damage of cropDetection of pests in crop culture
Miniaturized Sensor nodes
Technology approaches forbiodegradability

Data gateway withmobile connection

Expert system fordata visualization,evaluation andrecommendation ofacting

Benefits:

 Autonomous work, no manualinspections
Continues supervision oftemperature and wetness of leafs

Applications: Crop cultures
 Vegetable cultivation
Technology Readiness Level: 2© Fraunhofer ENAS

eGrain, measurement oftemperature, humidity, gases,…

Outline

1. Working fields Fraunhofer ENAS
2. Industry 4.0
3. Hybrid sensors and sensor systems for Industry 4.0

4. Lighthouse project Go Beyond 4.0
5. Spectroscopy - application in agriculture monitoring
6. Summary© Fraunhofer ENAS

Processor

New andm ultifunctional
S m art S y s tem s&RadioMemorySensor
Power&Actuator

Silicon based
technologies

Non-silicon based
technologies

System integration
technologies

Key factors
Technologies

Sensors

MEMS technologies
Advanced integration

Accurate, Small
Low power, Reliable
Low cost

Issues and goals: Size! Price! Nice!
© Fraunhofer ENAS

International Conference & Exhibition on integration
issues of miniaturized systems – MEMS, MOEMS, ICs
and electronic components14. Conference: 01-02 April 2020, Grenoble, FranceOrganizer:
Part of theActivities of:Chair:

Prof. Dr. T. Otto, Fraunhofer ENAS

Co-Chair:Dr. Stefan Finkbeiner, Bosch Sensortec and EPoSS
Wolfgang Gessner, EPoSS© Fraunhofer ENAS

Contact us
Fraunhofer ENAS
Prof. Dr. Thomas Otto
Technologie-Campus 309126 Chemnitz Germany

Phone: +49 (0)371 45001-100
Fax:+49 (0)371 45001-101
Email: info@enas.fraunhofer.de
Web: http://www.enas.fraunhofer.de/EN© Fraunhofer ENAS