English

Cautions◎The products may be damaged if it is hit or dropped, please handle carefully.
◎Please make sure to install the safety device in case the product is used in the system that may
have a serious accident or loss if the product is failed.
◎Since the unexpected noise, electrostatic, or incase of abnormal failure of input power source,
wiring, and parts may be occurred although we put our effort to keep the product quality, pleaseconsider the fail-safe design and the safety in the range of movement before use.
◎Please read the instruction manual carefully and understand fully before use the product.
Also, please pay attention to the cautions mentioned in the manual.
◎In the product, strong magnets are used, Please do not stand near by the product if you have thepace maker device in the heart in order to avoid serious accident.
◎Please make sure to unplug the all power supply cables before installing, checking, andmaintenance of the product. Also, please make sure to take measures such as safety plug or
locking the power supply cables to avoid re-inputting the power other than the operator.

※"τDISC", "τLinear", "Servo compass", and "τENGINE" are the registered brand of Nikki Denso Co., Ltd.
※The photos used in the catalog are for images only and may not be same as actual products.

Overseas Sales Dept.
Address:1-4-2, Osaku, Sakura-shi, Chiba-kan 285-0802 Japan

TEL:+81-43-498-2315 / FAX:+81-43-498-4654

E-Mail:overseas@nikkidenso.co.jp Website:http://www.nikkidenso.co.jp

Head office
Address:2-8-24, Arima, Miyamae-ku, Kawasaki-shi, Kanagawa-ken 216-0003 Japan

TEL:+81-44-855-4311 / FAX:+81-44-854-7746

Document No.NO20A201107-2000
The contents in this catalog is as of July 2011.
The specifications, rating, or dimensions of products in this catalog may be changed without notice for the improvement.
Although we carefully editing this catalogs, we are not responsible for any damage caused by errors and omissions.

Reprint without permission is forbidden.

τLinear Stage
SophisticatedSophisticated Control
Control StageStage

τLinear X Stage ・τLinear XY StageτLinear Xθ Stage ・τLinear XYθ StageτLinear Custom-made Stage

CONTENTS

X StageHigh precision stage equipped with a linear servo motor
Control stage realized in combination with servo control technology

High performance linear stage

Selection Chart

p.3

Explanation of the Model Number

p.4

General Specifications

p.4

Mounted Linear Servo Motor Specifications andAvailable Servo Drivers

p.4

Stage Machine Specifications (without Bellows)

p.5

Stage Machine Specifications (with Bellows)

p.6

External Dimensions (without Bellows)

p.7

External Dimensions (with Bellows)

p.8

XY Stage●Speed variation performance guaranteed

Selection Chart

p.9

Explanation of the Model Number

p.10●Check and setting of user-requested operation specifications supported

General Specifications

p.10●Positioning accuracy guaranteed by using laser measurement correction data

Mounted Linear Servo Motor Specifications andAvailable Servo Drivers

p.10

Stage Machine Specifications (without Bellows)

p.11

Stage Machine Specifications (with Bellows)

p.12

Example of positioning accuracy data measured with a stroke of 600 mm

External Dimensions (without Bellows/Medium- or
Large-Size Cableveyor)
pp. 13-15(The guaranteed accuracy is 1 mm.)1

External Dimensions (without Bellows/Low-Profile
Cableveyor)
pp. 16-18
External Dimensions (with Bellows)

pp. 19-22← Absolute position error (μm) →Standard Stage Options

0.5

0.23μm0

θ-Axis Option

p.23

Bellows Option

p.24

Machine Accuracy Options

p.24

Encoder Type (Resolution) Selection

p.24

Cableveyor Selection

pp. 25-26

Cable Selection

pp. 27-28

External Dimensions of τDISC Motors for the θ-Axis pp. 29-30−0.5

Accuracy Measurement Methods

pp. 31-33

Zero Point, and Zero Point Deceleration and Overtravel Sensors p.34
−1
−300

0

Acceptance Inspection, Delivery, and Warranty

p.35

Required Specification List

p.36

Custom-Made Stages

p.37

300

←Stroke (mm)→(Positions measured by Renishaw's laser measurement system)

Measurement Environment System for High Quality Stages p.37●●

Servo Drivers

p.38◆ VCⅡSeries

Rich lineup and custom-made stage available●Standard lineup including X and XY stages

Explanation of the Model Number

p.39

General Specifications

p.39

Electrical Specifications

p.39●Lineup also including Xθ and XYθ stages equipped with high precision direct drive
servo motor τDISC series for theθ-axis

Function Specifications

p.40

External Connection Diagram

p.41

External Dimensions

p.42●Custom-made stages such as a multi-head stage and XYZ-axis stage also available

Configuration of Options

p.43◆ VPS Series●●

Selectable servo network system●Following network system options available in combination with servo driver VC II series

Motion network : MECHATROLINK-Ⅲ and SSCNET Ⅲ
Field network: CC-Link and DeviceNet

Explanation of the Model Number

p.44

General Specifications

p.44

Electrical Specifications

p.44

Function Specifications

p.45

External Connection Diagram

p.46

External Dimensions

p.47

Configuration of Options p.48

Linear Transfer Stage: Stage Block p.49
Direct Drive Product Lineup

1

p.50

2

τLinearＸStageτLinear

ＸStage□ Standard X Stage Selection Chart

START

Effective stroke

Select mainstage unit

100／200／300／500／700／1000／1300mm

Rated thrust
68／95／150Ｎ

τLinear

ＸStage□ Explanation of the Model Number

ＮＳＴ-Ａ

030

A3

A

P

NA-S01

①

②

③

④

⑤

⑥

⑦

① τlinear X stage series name
② Effective stroke

10 mm units. Example) 030→Stroke: 300 mm③ Linear motor type/rated thrust※

The boxed thrust indicates
the thrust of the standard productof each type.

④ Design order

A：Flat coreless type (NVA-AM)

3：68N

1：23N

2：45N

4：90N

5：135N
5：300N

B：High-thrust coreless type (NVA-BM)

3：150N

1：50N

2：100N

4：200N

D：Standard coreless type (NLD-AM)

2：95N

1：50N

3：150N

4：200N

A→B→C･･･（Starting with A）⑤ Code set by the manufacturer

No

Yes

Bellows option
required?

⑥ Bellows setting

NA：Without bellows⑦ Customization code

None：Standard specification

JA：With bellows
S+serial-number：Customized specification※If you want to use a model with a non-standard thrust, contact our sales representative.

※See p.24.

□ General Specifications

Selectencoderresolution●Incremental
Tape scale：
5／1／0.5／0.1／0.05μm
Glass scale：0.2／0.1μm

Selectencoderresolution

Specification

Absolute
0.5／0.1μm※See p.6.

●Absolute
0.5／0.1μm

Item

Temperature
Ambient
conditions※See p.5.

Humidity

85% or less with no condensation

Installation

Do not install the stage in any harmful atmosphere such as corrosive gas, cutting oil, metal dust, or oil.
1000 m or lessAltitudeNatural cooling

Cooling method
Mounting orientation

Direct drive
servo motor
τDISC motor typeθ-axisoption※See p.23.

22℃±2℃※Any accuracy is not guaranteed in any environment other than the above.
※The positioning accuracy, repetitive positioning accuracy, and accuracy in lost motion are guaranteed
only when the temperature is kept constant at 22℃.

Without bellows：Mount the table horizontally upward or downward. ※2※1

With bellows：Mount the table horizontally upward.
Base：Made of steel. Mainly black. Low-temperature black chrome treatment.

Detection pulses

Table：Made of aluminum alloy. Mainly black. Black alumite treatment.

Finishing

400,000, 1,000,000, 2,000,000,

Rust prevention treatment applied appropriately for other parts unless otherwise stated.

or 4,000,000 ppr※1：If you want to use the stage mounted on a wall, contact our sales representative.

※See p.23.
※2：

When mounting the stage downward, install a device for preventing the table from falling when the linear guide is broken.
When the linear guide is broken, the table drops out of the rail.

□ Mounted Linear Servo Motor Specifications and Available Servo Drivers
Medium size (type C)
Large size (type D)

Selectcableveyor※See p.25.

Select encoder, motor,
and OT cables

Selectcables※See pp. 27-28.

Stage model number

Mounted linear motor model number ※1

010A3＊＊〜130A3＊＊

010B3＊＊〜130B3＊＊

NVA-AMC30A2A□

NVA-BMC00A2A□

010D2＊＊〜130D2＊＊
NLD-AM20SA2□

Flat coreless typeHigh-thrust coreless type

Standard coreless type

Rated thrust

N

68

150

95

Maximum thrust

N

204

450

275（237.5 ※2）

Rated motor speedm/s

Maximum motor speed ※3m/s

Rated output

W

204

450

285

Rated current

A

2.55

2.85

3.4

3.0
3.5

Automatic magnetic pole detection method
Available driver※4

Magnetic pole sensor used or magnetic pole automatically detected

VCⅡseries

NCR-□DA□A2A-401DVPS series

Main power supply

Specify positioning
Machine accuracy
accuracy, attitude accuracy, measurement
and speed variation.
options

NST-A※5

NCR-DC□0A2B-401□
200 to 230 VAC

50/60 Hz

NCR-DC□0A2-801□

Three-phase power supply (single-phase for VPS series NCR-DC□0A2A-401□)※1：For details of motor specifications, refer to theτLinear Servo Motor Brochure.
※2：When a VPS series driver is used
※3：The maximum speed as the stage depends on the maximum motor speed, maximum allowable speed according to the encoder resolution (see pp. 5-6), andmaximum allowable bellows speed (see p.6), and is the slowest speed of them. The maximum speeds are determined out of consideration of the acceleration
capability of the mass of the moving part of the stage.
※4：For details of the VCⅡseries, see pp. 39-43. For details of the VPS series, see pp. 44-48.
※5：If you want to use a 100-VAC power supply, contact our sales representative.

※See p.24.

34τLinear

ＸStageτLinearＸStage□ Stage Machine Specifications (without Bellows)□ Stage Machine Specifications (with Bellows)Stage model number

010A3

020A3

030A3

050A3

070A3

100A3

130A3

Stage model number

010A3

020A3

030A3

050A3

070A3

100A3

130A3

(for □, choose from the right list.)

010B3

020B3

030B3

050B3

070B3

100B3

130B3

(for □, choose from the right list.)

010B3

020B3

030B3

050B3

070B3

100B3

130B3

NST-A□APJA

010D2

020D2

030D2

050D2

070D2

100D2

130D2

100

200

300

500

700

1000

1300

（130）

（230）

（330）

（530）

（730）

（1030）（1330）NST-A□APNA
Stage effective stroke ※1

mm

010D2

020D2

030D2

050D2

070D2

100D2

130D2

100

200

300

500

700

1000

1300

（130）

（230）

（330）

（530）

（730）

（1030）（1330）mm

Straightness ※6

μm

3

3

5

7

10

12

15

Straightness ※6

μm

3

3

5

7

10

12

15

Parallelism B ※6

μm

10

10

15

20

25

30

35

Parallelism B ※6

μm

10

10

15

20

25

30

35

Encoder type
Encoder model number andcorresponding resolution
NSR-LABA□A1A05

tape scale
Upper:VCⅡdriver
Lower:VPS driver（）

A1：5μm

B1：1μm

C1：0.5μm

E1：0.1μm

F1：0.05μｍ

Encoder model number and corresponding resolution

A1：5μm

B1：1μm

C1：0.5μm

ED：0.1μm

FD：0.05μｍ

NSR-LFDA□E5A10-＊＊＊1μm：5m/s

0.5μm：2.5m/s

0.1μm：1.3m/s

0.05μm：0.6m/s

Maximum allowable encoder speed ※2 m/s

55μm：10m/s

1μm：4m/s

0.5μm：2m/s

0.1μm：0.7m/s

0.05μm：0.3m/s

Maximum allowable bellows speed ※2

m/s

1.6

Repetitive positioning accuracy ※6

μm

±0.5

Lost motion ※6

μm

1

Load capacity ※4、※5

kg

200

Assumed moving part mass ※5kg

Maximum allowable

D1：0.2μm

E1：0.1μm

0.2μm：0.8m/s

encoder speed ※2
Encoder model number andcorresponding resolution
NSR-LFDA□E5A10-＊＊＊Maximum allowableencoder speed ※2

0.1μm：0.4m/s

C2：0.5μm

E2：0.1μm

0.5μm：5m/s

0.1μm：5m/s

μm±5 （with 5μm）

±1（with 1μm）

±0.5 （with 0.5、0.2、0.1、0.05μm）

Lost motion (encoder resolution) ※6μm

10 （with 5μm）

2（with 1μm）

1 （with 0.5、0.2、0.1、0.05μm）

Load capacity ※4、※5

kg

200

Assumed moving part mass ※5

kg

7

NST-＊＊A3APNA

kg

36

42

48.5

Assumed mass ※5 NST-＊＊B3APNA

kg

40.5

48.5

NST-＊＊D2APNA

kg

38

45

Positioning accuracy (encoder resolution) ※3、※6

μm

Speed variation ※6、※7

±％

※7

※

10

10

37.5

43.5

50.5

63

76

95

114

Assumed mass ※5 NST-＊＊B3APJA

kg

42

50

59.5

75

91

115

138.5

NST-＊＊D2APJA

kg

39.5

46.5

54

67.5

81.5

102.5

123

20

25

92

110.5

Attitude accuracy: Pitch and yaw angles ※6、※7 asec

15±％

Depends on the customized specification.

※1
※2

73

88.5

112

135

79

99.5

119.5

※3
※4

20

25

※5
※6
※7

2（with 1、0.5μm）

15

Speed variation ※6、※7

65.5

1 （with 0.2、0.1、0.05μm）

Depends on the customized specification.

15

1

52

15

10

μm

57.5

15

10

Positioning accuracy ※3、※6

73.5

15

10 （with 5μm）

kg

61

Items related to options (values when machine accuracy measurement options are specified)Attitude accuracy: Pitch and yaw angles ※6 asec

8

NST-＊＊A3APJA

Items related to options (values when machine accuracy measurement options are specified)

Repetitive positioning accuracy (encoder resolution) ※6※5※6

E2：0.1μm

5μm：10m/s

scale

※3
※4

C2：0.5μm

encoder speed ※2

Incremental glass※1※2

Absolute

Maximum allowable

Encoder model number andcorresponding resolution
NSR-LJFB□J3A05

Absolute

Encoder type

Select the incremental or absolute type.

Incremental

5

Stage effective stroke ※1※

The value in parentheses indicates an approximate stroke between the mechanical stoppers.
The maximum speed as the stage depends on the maximum motor speed (see p.4), maximum allowable speed according to the encoder resolution, andmaximum allowable bellows speed, and is the slowest speed of them.
The maximum speeds are determined out of consideration of the acceleration capability of the mass of the moving part of the stage.
The repetitive positioning accuracy and positioning accuracy depend on the encoder resolution.
With the load capacity, the machine accuracy can be guaranteed. Use the stage in an equal load condition. If you want to use the stage in a variable orunequal load condition, contact our sales representative. Bearing life depends on the operating conditions and others, so separate consideration is required.
The mass with the θ-axis added is not included.
For details of how to measure the accuracy, see "Accuracy Measurement Methods" on pp. 31-33.
Each value indicates the accuracy when the relevant machine accuracy option is specified.
A customized specification is set for the speed variation individually depending on the use conditions (including the speed and load).
For details, contact our sales representative.
If you want to use a higher precision product, contact our sales representative.

The value in parentheses indicates an approximate stroke between the mechanical stoppers.
The maximum speed as the stage depends on the maximum motor speed (see p.4) and maximum allowable speed according to the encoder resolution, and is
the slowest speed of them.
The maximum speeds are determined out of consideration of the acceleration capability of the mass of the moving part of the stage.
The repetitive positioning accuracy and positioning accuracy depend on the encoder resolution.
With the load capacity, the machine accuracy can be guaranteed. Use the stage in an equal load condition. If you want to use the stage in a variable or unequalload condition, contact our sales representative.
Bearing life depends on the operating conditions and others, so separate consideration is required.
The mass with the θ-axis added is not included.
For details of how to measure the accuracy, see "Accuracy Measurement Methods" on pp. 31-33.
For straightness, straightness A is measured when the effective stroke is 700 mm or less and straightness B is measured when it is 1000 mm or more.
A customized specification is set for the speed variation individually depending on the use conditions (including the speed and load). For details, contact oursales representative.
If you want to use a higher precision product, contact our sales representative.

6τLinear

ＸStageτLinearＸStage□ External Dimensions of the
X Stage without Bellows□ External Dimensions of the
X Stage with Bellows※3：When no extension cables are used※2

Cables (with the selectedcable length) are connectedfrom the end of the stage base.

Cableveyor D※3：When no extension
cables are used

（LB1）※2※2※2 Cableveyor D

X-axis motor cable

X-axis motor cable

X-axis sensor cable

132

132

（LB1）※2

Cables (with the selectedcable length) are connectedfrom the end of the stage base.

Cableveyor D

220

8

378

220

X-axis ±OT/ZLS cable

X-axis sensor
connector

4-M8 depth 15(for mounting a workpiece)※2 Cableveyor C

100

1000 +1000 from the end of the stage base

LP3

LP2

45°

LP1

(hatched section)

LP1

LP1

LP2

LP4

110

230

150
（60）

Hθ※1

LP3

LP3
LP5

4-M8 depth 20(for a hanging bracket)

110

NH-hole dia. 9, counterbore dia.
14 depth 9 (for fixing the stage)

86±0.1+100

1000 0 from the endof the stage base

182

125

47.5

145
37.5

φ2
05

26

26

230（table）

LP1

220（table）

110

354

37.5
（60）

220

4-M6 depth 12(for mounting a workpiece)

4-M10 depth 15(for mounting the θ-axis)
X-axis sensor
connector（45）

Linear motor

150

Hθ※5

Incremental tape scale type

4-M12 depth 20(for a hanging bracket)

110

NH-hole dia. 9, counterbore dia.
14 depth 9 (for fixing the stage)

86±0.1（5）

X-axis motor
connector

8

47.5

φ2
05

182

220(table）

47.5

37.5

45°

220（base）

（54）

100
8
346

220(base）(hatched section)

159※2 Cableveyor C

Linear motor
26（164）※2

4-M6 depth 12
4-M8 depth 15(for mounting a workpiece) (for mounting a workpiece)

X-axis ±OT/ZLS
connector

（45）

（54）

Cableveyor C（40.5） （φ29）

4-M10 depth 15(for mounting the θ-axis)

（45）

18

※2

X-axis motor
connector

125

(5)

159

145

(164)※2（40.5） （φ29）

（54）

※1

※2 Cableveyor D※3：When extension cables are used

※3：When extension cables are used

Cableveyor C

37.5

※2

47.5

378

8

X-axis sensor cable

LP2

230

LP1

LP1

LP1

LP1

LP2

LP3

LP5
LP5

LP4

LP5

26

26

※1

86±0.1※1

Positive/negative direction

26

Hanging bracket

Incremental glass scale type

ST2

ST2

（St. between mechanical stoppers）（St. between mechanical stoppers）

ST1（effective St.）

ST1（effective St.）

※1：In this figure, a slider is drawn at the center of the stroke.
For the encoder, check the specifications of the selected
type.
Use the external dimensions of each selected encoder.
※2:No allowance for a bulging cableveyor is included.
For the cableveyor, check the specifications of the selected type.
Use the external dimensions of each selected cableveyor.
※3:For the cableveyor and extension cables, check the specifications of each selected type.
Use the external dimensions of each selected cable.
※4:The position of the zero point to be detected is at thecenter of the stroke.
※5:Hθ indicates the dimension when the τDISC Motor
D170-040-F/FP (option) is mounted and the value in parentheses indicates the dimension when the τDISC Motor
D170-100-F/FP is mounted.

St. between mechanical stoppers

St. between mechanical stoppers
ST1 Effective St.

Hanging bracket（LB2）※2

Position of the zero point※4

Position of the zero point※4

Wiring hole
80×25
(LJ2)

(LT)

(LJ1)

(LJT)

※1

Incremental tape scale type※1Note) St. means stroke.

※1※1：Hθ indicates the dimension when theτDISC Motor D170-040-F/FP (option) is mounted andthe value in parentheses indicates the dimension when theτDisc Motor D170-100-F/FP is mounted.
※2:No allowance for a bulging cableveyor is included.
For the cableveyor, check the specifications of the selected type.
Use the external dimensions of each selected cableveyor.
※3:For the cableveyor and extension cables, check the specifications of each selected type.
Use the external dimensions of each selected cable.
※4:The position of the zero point to be detected is at the center of the stroke.

Absolute type

Notes) ・In this figure, a slider is drawn at the center of the stroke.
Only the absolute type of encoder is available and another type of encoder can be selected.
・St. means stroke.

Incremental glass scale type

□ X Stage Dimensions （Unit : mm NH : Number of holes）

7

ST2

ST1 Effective St.
（LB2）※2

Wiring hole
80×25

（LB2）※2

ST2

−

LT

86±0.1−LT

Incremental glass scale type

（LB3）
26

Positive/negative direction

(LB3)

＋

※1

＋

Absolute type

Absolute type
220

※1

※2

※2

No.

Model number

LT

ST1

ST2

NH

LP1

LP2

LP3

LP4

LP5

LB1

LB2

LB3

※5

1

NST-A010＊＊APNA

380

50

65

8

120

120

10

320

30

255.9

94.6

2

NST-A020＊＊APNA

480

100

115

8

140

140

30

450

15

274.9

3

NST-A030＊＊APNA

580

150

165

10

125

125

40

540

20

301.9

4

NST-A050＊＊APNA

780

250

265

14

125

125

15

400

190

347.9

□ X Stage Dimensions （Unit : mm NH : Number of holes）

※2

※2

No.

Model number

LT

ST1

ST2

NH

LP1

LP2

LP3

LP4

LP5

LB1

LB2

LB3

LJ1

LJ2

LJT

50

1

NST-A010＊＊APJA

380

50

65

8

120

120

10

320

30

255.9

94.6

50

30

90

500

94.6

50

2

NST-A020＊＊APJA

480

100

115

8

140

140

30

450

15

274.9

94.6

50

45

105

630

94.6

50

3

NST-A030＊＊APJA

580

150

165

10

125

125

40

540

20

301.9

94.6

50

65

125

770

94.6

50

4

NST-A050＊＊APJA

780

250

265

14

125

125

15

400

190

347.9

94.6

50

95

155

1030

Hθ

130.5
(190.5)※1

5

NST-A070＊＊APNA

980

350

365

18

125

100

15

550

215

393.9

94.6

50

5

NST-A070＊＊APJA

980

350

365

18

125

100

15

550

215

393.9

94.6

50

130

190

1300

6

NST-A100＊＊APNA

1280

500

515

22

125

125

15

700

290

485.9

101.1

50

6

NST-A100＊＊APJA

1280

500

515

22

125

125

15

700

290

485.9

101.1

50

180

240

1700

7

NST-A130＊＊APNA

1580

650

665

26

125

125

40

850

365

550.9

101.1

50

7

NST-A130＊＊APJA

1580

650

665

26

125

125

40

850

365

550.9

101.1

50

235

295

2110

Hθ

130.5
(190.5)8

τLinearＸY StageτLinear

ＸYStage□ Standard XY Stage
Selection Chart

τLinear

ＸYStage□ Explanation of
the Model Number

ＮＳＴ-D 30 B 4／30 A 4 A P NA -S01
①

START

Effective stroke (X/Y)

Select mainstage unit

100/100、200/200、250/250
300/300、350/350、500/400
600/450mm②③ ④⑥ ⑦ ⑧ ⑨⑤⑩⑪

① τ linear XY stage series name
② X-axis effective stroke

10 mm units. Example) 030→Stroke: 300 mm③ X-axis linear motor type

B：High-thrust coreless type (NVA-BM)④ X-axis linear motor rated thrust

1：50N⑤ Y-axis effective stroke

10 mm units. Example) 030→Stroke: 300 mm⑥ Y-axis linear motor type

A：Flat coreless type (NVA-AM)⑦ Y-axis linear motor rated thrust

1：23N⑧ Design order

A→B→C･･･

2：100N

2：45N

3：150N

3：68N

4：200N

4：90N

5：300N

5：135N※The linear motor type and rated thrust of eachstandard product are listed in the table below.

※The linear motor type and rated thrust of eachstandard product are listed in the table below.

（Starting with A）⑨ Code set by the manufacturer

No

Bellows option
required?

Yes

NA：Without bellows (Medium-size cableveyor：Type A/Large-size cableveyor：Type B)⑩ Bellows setting

J A：With bellows (Medium-size cableveyor： Type E/Large-size cableveyor：Type F)⑪ Customization code

※See p.24.

None：Standard specification※Linear motor type and rated thrust of each standard product
XY stage model number（② to ⑦ above）

Selectencoderresolution

Incremental
5／1／0.5／0.1／0.05μm

S+serial-number：Customized specification

Selectencoderresolution※See p.11.

Linear motor type and rated thrust（X- and Y-axes）

X- and Y-axis effective strokes

10B3/10A3

X：100mm

Y：100mm

X：High-thrust coreless type (NVA-BM) 150N

Absolute

20B3/20A3

X：200mm

Y：200mm

Y：Flat coreless type (NVA-AM) 68N

0.5／0.1μm

25B4/20A4

X：250mm

Y：250mm※See p.12.

30B4/30A4

X：300mm

Y：300mm

35B4/35A4

X：350mm

Y：350mm

50B5/40A5

X：500mm

Y：400mm

X：High-thrust coreless type (NVA-BM) 300N

60B5/45A5

X：600mm

Y：450mm

Y：Flat coreless type (NVA-AM) 135N

X：High-thrust coreless type (NVA-BM) 200N
Y：Flat coreless type (NVA-AM) 90N※If you want to use a model with a non-standard thrust, contact our sales representative.

Medium size (type A)

SelectLarge size (type B)
cableveyor Low profile (type G)

SelectMedium size (type E)
cableveyor Large size (type F)□ General Specifications
Item※See p.25.

※See pp. 25-26.

Specification
22℃±2℃
Temperature

Ambient
conditions

Humidity

85% or less with no condensation

Installation

Do not install the stage in any harmful atmosphere such as corrosive gas, cutting oil, metal dust, or oil.

Altitude1000 m or less

Cooling method

Natural cooling

Mounting orientation

Direct drive
servo motorτDISC
motor typeθ-axisoption※See p.23.

※See p.23.

Mount the table horizontally upward.
Main sections X-axis：Mainly black Base：Made of steel. Low-temperature black chrome treatment.
Y-axis：Mainly black Base：Made of steel. Low-temperature black chrome treatment.
Table：Made of aluminum alloy. Black alumite treatment.
Rust prevention treatment applied appropriately for other parts unless otherwise stated.
※The main finished color is black and white mixed together.

FinishingDetection pulses□ Mounted Linear Servo Motor Specifications and Available Servo Drivers
Stage model number

NST-D

Selectcables※See pp. 27-28.

25B4／25A4＊＊
30B4／30A4＊＊
35B4／35A4＊＊

10B3／10A3＊＊
20B3／20A3＊＊
Ｘ

Ｙ

Ｘ

Ｙ

Ｘ

Ｙ

NVAー

BMC00A2A□

AMC30A2A□

BMD00A2A□

AMD30A2A□

BME00A2A□

AME30A2A□

Rated thrust

N

150

68

200

90

300

135

Maximum thrust

N

450

204

600

261（225 ※2）

900

405

Rated motor speedm/s

X-axis：High-thrust coreless type Y-axis：Flat coreless type

3.0
3.5

Maximum motor speed ※3 m/s

Specify positioning
Machine accuracy
accuracy, attitude accuracy, measurement
and speed variation.
options※See p.24.

950B5／40A5＊＊
60B5／45A5＊＊

Mounted linear motor
model number ※1

X-/Y-axis

Select encoder, motor,
and OT cables.

※Any accuracy is not guaranteed in any environment other than the above.
※The positioning accuracy, repetitive positioning accuracy, and accuracy in lost motion are guaranteed only when
the temperature is kept constant at 22℃.

Rated output

W

450

204

600

270

900

405

Rated current

A

2.85

2.55

3.8

3.4

5.7

5.1

Magnetic pole sensor used or magnetic pole automatically detected

Automatic magnetic pole detection method
Available
driver※4

VCⅡseries NCR-□D

A□A2A-401D

A□A2A-801DA□A2A-401D

A□A2A-801DVPS series NCR-DC□0A2B-401□□0A2B-801□□0A2B-401□□0A2B-801□

Main power supply ※5200 to 230 VAC

50/60 Hz

Three-phase power supply (single-phase for VPS series NCR-DC□0A2B-401□)※1：For details of motor specifications, refer to theτ Linear Servo Motor Brochure.
※2：When a VPS series driver is used
※3：The maximum speed as the stage depends on the maximum motor speed, maximum allowable speed according to the encoder resolution (see pp. 11-12),and maximum allowable bellows speed (see p.12), and is the slowest speed of them. The maximum speeds are determined out of consideration of the acceleration
capability of the mass of the moving part of the stage.
※4：For details of the VCⅡseries, see pp. 39-43. For details of the VPS series, see pp. 44-48.
※5：If you want to use a 100-VAC power supply, contact our sales representative.

10τLinear

ＸYStageτLinearＸY Stage□ Stage Machine Specifications (without Bellows)□ Stage Machine Specifications (with Bellows)Stage model number

Stage model number (for □, choose from the right list.)(for □, choose from the right list.)

10B3/10A3

20B3/20A3

25B4/25A4

30B4/30A4

35B4/35A4

50B5/40A5

60B5/45A5

X

Y

X

Y

X

Y

X

Y

X

Y

X

Y

X

Y

100

100

200

200

250

250

300

300

350

350

500

400

600

450

Stage effective stroke ※1

mmStraightness A ※6

μm

Squareness A ※6

μm

3

5

10

10

10

15

Parallelism B ※6

μm

15

15

15

15

15

25

3

3

Encoder model number and corresponding resolution

Maximum allowable encoder speed ※2（Lower：When the VPS driver is used）

3

3

5

5

5

5

5

5

10

10

kg

Attitude accuracy : Pitch and yaw angles ※6 asec
Positioning accuracy (encoder resolution)※3、※6、※7

μm

Speed variation ※6、※7

±％

Y

X

Y

X

Y

X

Y

X

Y

X

Y

200

250

250

300

300

350

350

500

400

600

450

Straightness A ※6

μm

25

Squareness A ※6

μm

3

5

10

25

Parallelism B ※6

μm

15

15

15

15

15

（130） （130） （230） （230） （280）（280） （330） （330） （380） （380） （530） （430） （630） （480）
3

3

3

3

5

5

Encoder type5

5

Encoder model number and corresponding resolution

15

25

25

E：0.1μm

Maximum allowable bellows speed ※2

m/s

1.6

0.05μm：0.35m/s

Maximum allowable encoder speed ※2

m/s

5

Repetitive positioning accuracy ※6

μm

±0.5

Lost motion ※6

μm

Load capacity ※4、※5

kg

Assumed moving part mass ※5kg

Assumed masskg

10 （with 5μm）

2（with 1μm）

1 （with 0.5、0.1、0.05μm）

50
7

69.5

100

37.5

7

81.5

54

9

57

145.5

9

156

60.5

9

126.5

167.5

19

378

132

19

431.5

15

15

15

10 （with 5μm）

15

15

15

15

2（with 1、0.5μm）

15

15

20

1
50
33.7

10.6

75

100

38.7

10.7

87.5

55.3 13.5

58.3 13.5

153

163.5

61.8 13.7 128.1 24.9 133.6 25.1
175.5

389.5

443.5

Items related to options (values when machine accuracy measurement options are specified)
20

20

20

1 （with 0.1、0.05μm）

Depends on the customized specification.

The value in parentheses indicates an approximate stroke between the mechanical stoppers.
The maximum speed as the stage depends on the maximum motor speed (see p.10) and maximum allowable speed according to the encoder resolution, andis the slowest speed of them.
The repetitive positioning accuracy and positioning accuracy depend on the encoder resolution.
With the load capacity, the machine accuracy can be guaranteed. Use the stage in an equal load condition. If you want to use the stage in a variable orunequal load condition, contact our sales representative.
Bearing life depends on the operating conditions and others, so separate consideration is required.
The mass with the θ-axis added is not included.
For details of how to measure the accuracy, see "Accuracy Measurement Methods" on pp. 31-33.
A customized specification is set for the speed variation individually depending on the use conditions (including, the speed and load). For details, contact oursales representative.
If you want to use a higher precision product, contact our sales representative.

15

15

C：0.5μm

NSR-LFDA□2E5A10-＊＊＊±0.5 （with 0.5、0.1、0.05μm）

15

Absolute

0.05μm：0.35m/s±1（with 1μm）

10

25

0.1μm：0.7m/s
0.1μm：0.7m/s

1015

0.5μm：2.5m/s
0.5μm：2m/s

510

1μm：5m/s
1μm：4m/s

5105μm：10m/s±5 （with 5μm）

15

X
200

F1：0.05μm

5μm：10m/s

32.5

Y

mm

Items related to options (values when machine accuracy measurement options are specified)

11

60B5/45A5

100

E1：0.1μm

kg
kg※

50B5/40A5

X

C1：0.5μm

μm

Assumed mass ※5

※5
※6
※7

35B4/35A4

100

B1：1μmμm

Assumed moving part mass ※5※3※4

30B4/30A4

A1：5μm

NSR-LBBA□A2A05※1※2

25B4/25A4

Stage effective stroke ※1

Incremental

Load capacity ※4、※5

X-/Y-axis（130） （130） （230） （230） （280）（280） （330） （330） （380） （380） （530） （430） （630） （480）

Encoder type

Lost motion (encoder resolution) ※6

20B3/20A3

NST-D□APJＢ

X-/Y-axis

Repetitive positioning accuracy (encoder resolution) ※6

10B3/10A3

NST-D□APJA

NST-D□APNA

Attitude accuracy : Pitch and yaw angles ※6 asec

15

15

15

15

15

15

15

15

15

15

Positioning accuracy ※3、※6μm

1

Speed variation ※6、※7±％

Depends on the customized specification.

※1
※2

※3
※4
※5
※6
※7

※

20

20

20

20

The value in parentheses indicates an approximate stroke between the mechanical stoppers.
The maximum speed as the stage depends on the maximum motor speed (see p.10), maximum allowable speed according to the encoder resolution, andmaximum allowable bellows speed, and is the slowest speed of them. The maximum speeds are determined out of consideration of the acceleration capabilityof the mass of the moving part of the stage.
The repetitive positioning accuracy and positioning accuracy depend on the encoder resolution.
With the load capacity, the machine accuracy can be guaranteed. Use the stage in an equal load condition. If you want to use the stage in a variable or unequalload condition, contact our sales representative. Bearing life depends on the operating conditions and others, so separate consideration is required.
The mass with the θ-axis added is not included.
For details of how to measure the accuracy, see "Accuracy Measurement Methods" on pp. 31-33.
Value when the relevant machine accuracy measurement option is specified
A customized specification is set for the speed variation individually depending on the use conditions (including, the speed and load).
For details, contact our sales representative.
If you want to use a higher precision product, contact our sales representative.

12

τLinear

ＸYStageτLinearＸY Stage□ External Dimensions of the XY Stage (without Bellows/Medium- or Large-Size Cableveyor)

Positive
direction（45）※4：When extension cables are used（40.5）

L×2

4-M10 depth 15 forfixing a workpiece

Ly2

Ly5

P3

Hθ※1

L×6※3

Ly4

H1※3

Bottom4-M12 depth 12 forfixing a workpiece

Ly4

6 holes dia. 11, counterbore dia.
17.5 depth 12
for fixing the stage

H1※3

Ly2

L×6 ※3

P2

P2

Lx2
Lx7

P3

ST×1:Effective St.

4-M8 depth 12 forfixing a workpieceHO

6 holes dia. 9,
counterbore dia. 14 depth 9
for fixing the stage

ST×1:Effective St.

Positive
direction

X-axis
Negative
direction

140
110
P1

140

ST×2:St. between mechanical stoppers ST×2:St. between mechanical stoppers

P1
L×1

110

140

Hθ※6

X-/Y-axis motor cables

P2
L×2
L×3

270（table）

ST×2：St. between
mechanical stoppers

ST×1：Effective St. ST×1：Effective St.

Negative
direction

X-axis

110
200

Lx1
P1

ST×2：St. between
mechanical stoppers

P1
Lx3

84

235（table）

.D2

05

D2

E.

P.

P.C

Positive
direction110

H0

Cables (with the selected cable
length) are connected from theend of the stage base.

（φ29）

L×4

P2
Lx2

Lx4

54

L×5

1000 +1000 from the end of the stage base

X-/Y-axis motor connectors（54）

X-/Y-axis sensor
connectors
（45）

Lx5

4-M8 depth 12

Y-axis ±OT/ZLS connector（45）
4-M10 depth 10

X-axis ±OT/ZLS connector

4-M8 depth 12
For fixing a workpiece（φ29）（40.5）

54

X-/Y-axis sensor cables※4：When extension cables are used

（54）

Y-axisPositive
direction

Y-axis1000 +1000 from the end of the stage base

STy1：Effective St.
STy2：St. between mechanical stoppers

Negative
direction

STy2：St. between mechanical stoppers STy2：St. between mechanical stoppers
Negative
direction

STy1：Effective St.
STy2：St. between mechanical stoppers

X-/Y-axis motor connectors

STy1：Effective St.

X-/Y-axis ±OT/ZLS cables

X-/Y-axis motor cables

Cables (with the selected cable
length) are connected from theend of the stage base.

※4：When no extension cables are used

X-/Y-axis sensor
connectors（45）

STy1：Effective St.

X-/Y-axis sensor cables

X-/Y-axis ±OT/ZLS cables※4：When no extension cables are used

NST−D25B4／25A4
NST−D30B4／30A4
NST−D35B4／35A4

Y-axis ±OT/ZLS connector

NST−D10B3／10A3
NST−D20B3／20A3

X-axis ±OT/ZLS connector□ External Dimensions of the XY Stage (without Bellows/Medium- or Large-Size Cableveyor)

Ly5
Ly6

Ly6

Use direction ※2

Top

BottomLy7※3

Use direction ※2

Top

Ly1
200(table）

Ly3

Ly3

Ly1

Ly7※3

52

Ly3

Ly3

270(table）

Bottom

Bottom

Use direction ※2

Use direction ※2

Top

Top

52

※1：Hθ indicates the dimension when the τDISC Motor D170-040-F/FP (option) is mounted and the value in parentheses indicates the dimension when the τDISC Motor
D170-100-F/FP is mounted.
※2:This stage is mounted horizontally upward.
※3:No allowance for a bulging cableveyor is included.
※4:For the cableveyor and extension cables, check the specifications of each selected
type.
※5:A⇒Cableveyor type A B⇒Cableveyor type B※1：Hθ indicates the dimension when theτDISC Motor D250-40-F/FP (option) is mounted.
※2:This stage is mounted horizontally upward.
※3:No allowance for a bulging cableveyor is included.
※4:For the cableveyor and extension cables, check the specifications of each selected type.
※5:A⇒Cableveyor type A B⇒Cableveyor type B

Tolerances not designated in the figure
Dimension

Notes)・St. means stroke.
・In this figure, all axes are drawn at the center of the stroke.

□ XY Stage External Dimensions※5
Model number
NST-D

APNA

B

20B3/20A3 A
APNA

13

B

500 132.5

484.5 97.5

80

514.5 127.5 110
584.5 97.5

80

614.5 127.5 110

68

※3

4.5

350

75

5

340
70

Tolerance

Dimension

Tolerance

6＜L≦30±0.2 120＜L≦315 ±0.5 1000＜L≦2000 ±1.2

※Hole pitch tolerances not designated in the figure are all ±0.2.

※3400 82.5

Dimension±0.1 30＜L≦120 ±0.3 315＜L≦1000 ±0.8

※3

Lx1 Lx2 Lx3 Lx4 Lx5 Lx6 Lx7 Ly1 Ly2 Ly3 Ly4 Ly5 Ly6 Ly7 P1

10B3/10A3 A

Tolerance

L≦6

4.5

450

125

55

150 495
175 520200 595
225 620147 150

P2

P3 STx1 STx2 STy1 STy2

50

50

65

50

50

□ XY Stage External Dimensions※5

25B4/25A4

A

H1

Hθ

APNA

B

30B4/30A4

A

166.5±0.3

APNAB(226.5±0.3)

35B4/35A4

A

APNA

B

600 165

650 190

700 21570

700 125 100
720 9570

750 125 100
770 9570

800 125 100

Dimension

Tolerance

Dimension

Tolerance±0.1 30＜L≦120 ±0.3 315＜L≦1000 ±0.8

6＜L≦30±0.2 120＜L≦315 ±0.5 1000＜L≦2000 ±1.2

※Hole pitch tolerances not designated in the figure are all ±0.2.
※3670 95ToleranceL≦6※3

Model number NST-D Lx1 Lx2 Lx3 Lx4 Lx5 Lx6 Ly1 Ly2 Ly3 Ly4 Ly5 Ly6 Ly7 P1※1

122±0.2 228
100 115 100 115

Notes) ・St. means stroke.
・In this figure, all axes are drawn at the center of the stroke.

※3

65

300
149 200

H0

Tolerances not designated in the figure
Dimension

28 580155 7022 625 440 177.5 92.5

26 680205 120212.5 722.5
237.5 747.5
235

767.5

260

792.5

262.5 822.5
287.5 847.5

P2P3 STx1 STx2 STy1 STy2

113 250 50

125 140 125 140

H0

※3

※1

H1

Hθ

110 275 50 400 150 165 150 165 142±0.2 240 186.5±0.3

111 300 50

175 190 175 190

14τLinear

ＸYStageτLinearＸY Stage□ External Dimensions of the XY Stage (without Bellows/Medium- or Large-Size Cableveyor)□ External Dimensions of the XY Stage (without Bellows/Low-Profile Cableveyor)

NST−D50B5／40A5
NST−D60B5／45A5

NST−D10B3／10A3
NST−D20B3／20A3
Cables (with the selectedcable length) are connectedfrom the end of the stage base.

X-/Y-axis sensor cables

STy1：Effective St.

STy2：St. between mechanical stoppers STy2：St. between mechanical stoppers

STy2:St. between
mechanical stoppers

Negative
direction

Positive
direction

Y-axis※４：When extension cables are used

（54）

＋100

X-/Y-axis motor
connectors

STx1：Effective stroke STx1：Effective stroke

P16-holes dia. 9,
counterbore dia.
14 depth 9 forfixing the stage
Lx6

Ly2

（45）
Positive
direction
Negative
direction

140

Lx2

P2

Ly4

H1※3

X-axis110

For fixing aworkpieceP3

Use direction ※2

110
200

235(table)

P.C
.D
20
5

Ly5

P2

Lx2

8-M12 depth 24（Depth 18 only for twoplaces marked with ★）BottomX-/Y-axis sensor
connectors

P1

4-M8 depth 12

4-M8 depth 16
4-M16 depth 24

Hθ※1

Y-axis ±OT/ZLS connector

（45）

P2

Lx4
For fixing a workpiece

4-M10 depth 10

4-M10 depth 20

HO

X-axis ±OT/ZLS connector

Lx5
STx1：Effective St.

Lx2

4-M8 depth 12

Lx3

Negative
direction
260

Lx1

X-axisPositive
direction
240

200

320

Lx1

（N/2-1)xP1

Lx3

240

STx1：Effective St.

STx2：St. between mechanical stoppers STx2：St. between mechanical stoppers

P1

Lx2
L×4
420（table）

D4

C.

P.

50

121

（φ29）
1000 0 from the end of thestage base（40.5）

54

200

X-/Y-axis motor cables

STy1:Effective stroke STy1:Effective stroke
STy2:St. between
mechanical stoppers

STx2：St. between
mechanical stoppers

X-/Y-axis motor connectors（54）

X-/Y-axis sensor
connectors
（45）

（φ29）
1000+1000 from the end of the stage base（40.5）

P2

Lx5

X-axis ±OT/ZLS
OT/ZLS connector

（45）

54

Cables (with the selected cable
length) are connected from theend of the stage base.

※4：When extension cables are used

X-/Y-axis sensor cables

X-/Y-axis ±OT/ZLS cables※４：When no extension cables are used

Positive
direction

Y-axisY-axis ±OT/ZLS connector

Negative
direction

STx2：St. between
mechanical stoppers

STy1：Effective St.

X-/Y-axis motor cables

X-/Y-axis ±OT/ZLS cables※4：When no extension cables are used

P3

H0

Ly6

Top

Hθ ※1
N-holes dia. 14, counterbore dia.
20 depth 13 for fixing the stage

Use direction ※2

Ly6

Top

Ly1

Ly1

420（table）

Ly3

Ly5

Ly7 ※3
Bottom

Ly7※3

Ly2

Ly4

Ly3

Ly3

Ly3

200（table）

Top

52

Bottom

Use direction ※252※1：Hθ indicates the dimension when theτDISC Motor D400-40-F/FP (option) is mounted.
※2:This stage is mounted horizontally upward.
※3:No allowance for a bulging cableveyor is included.
※4:For the cableveyor and extension cables, check the specifications of each selected type.
※5:A⇒Cableveyor type A B⇒Cableveyor type B
Notes) ・St. means stroke.
・In this figure, all axes are drawn at the center of the stroke.

□ XY Stage External Dimensions

APNA

B

60B5/45A5 A
APNA

15

B

Tolerance

Dimension

Tolerance

980 2801080 330

1050

85

70

1080 115 100
1150

85

70

1180 115 110

Ly1 Ly2 Ly3 Ly4 Ly5 Ly6 Ly7
850

215

75

700
900

Dimension

ToleranceL≦6±0.1 30＜L≦120 ±0.3 315＜L≦1000 ±0.8

6＜L≦30±0.2 120＜L≦315 ±0.5 1000＜L≦2000 ±1.2

※3

Lx1 Lx2 Lx3 Lx4 Lx5

50B5/40A5 A

Dimension※Hole pitch tolerances not designated in the figure are all ±0.2.

※5Model number
NST-D

Tolerances not designated in the figure

240 100

230 1005
255 1030
255 1055
280 1080

42

N

P1

P2

8

250

115

P3 STx1 STx2 STy1 STy2
250 265

200

10

250

40

※3

※1

H1

Hθ

172±0.2 253 220.5±0.3
300 315225

240

Tolerances not designated in the figure
Dimension

Notes)・St. means stroke.
・In this figure, all axes are drawn at the center of the stroke.

□ XY Stage External Dimensions

Tolerance

Dimension

Tolerance

Dimension

Model number NST-D Lx1

Lx2

10B3/10A3APNA 400

82.5 574.5

Lx3

20B3/20A3APNA 500 132.5 674.5

Lx4

ToleranceL≦6±0.1 30＜L≦120 ±0.3 315＜L≦1000 ±0.8

6＜L≦30±0.2 120＜L≦315 ±0.5 1000＜L≦2000 ±1.2

※Hole pitch tolerances not designated in the figure are all ±0.2.
※3

215

660
53

H0

※1：Hθ indicates the dimension when the τDISC Motor D170-40-F/FP (option) is mounted
and the value in parentheses indicates the dimension when the τDISC Motor D170100-F/FP is mounted.
※2:This stage is mounted horizontally upward.
※3:No allowance for a bulging cableveyor is included.
※4:For the extension cables, check the specifications of each selected type.

Lx5

Lx6

187.5 170

4.5

Ly1
350
450

Ly2
340

Ly3

※1

Ly4

Ly5

Ly6

Ly7

P1

75

5

165

510

45

150

125

55

215

610

35

200

P2

P3 STx1 STx2 STy1 STy2

50

300

50

65

50

65

100

115

100

115

H0

Hθ

166.5±0.3
122±0.2（226.5±0.3）16τLinear

ＸYStageτLinearＸY Stage□ External Dimensions of the XY Stage (without Bellows/Low-Profile Cableveyor)□ External Dimensions of the XY Stage (without Bellows/Low-Profile Cableveyor)

NST−D25B4／25A4
NST−D30B4／30A4
NST−D35B4／35A4

NST−D50B5／40A5
NST−D60B5／45A5

STy1:Effective stroke

STy1:Effective stroke

STy2:St. between
mechanical stoppers

STy2:St. between
mechanical stoppers

Negative
direction

Y-axisCables (with the selected cable
length) are connected from theend of the stage base.

STx1:Effective stroke
STx1:Effective stroke

Positive

STx2:St. between
mechanical stoppers

X-axis direction

Negative
direction
200

STx2:St. between
mechanical stoppers

240

200

320

420(table)（N/2-1）
×P1

Lx3

STx1:Effective stroke
STx1:Effective stroke

Lx1

STx2:St. between
mechanical stoppers

X-axis
Negative
direction

140

110

P1

STx2:St. between
mechanical stoppers

Positive
direction

P1

Lx4

Lx2
270(table)

Lx3
Lx1

140

50

110

.D4

P.C
.D
28
4

P.C

Lx4

Lx2

P2

P2

X-/Y-axis motor
connectors

X-/Y-axis sensor
connectors

（54）

（45）

Y-axis ±OT/ZLS connector

（45）

（φ29）

（40.5）

146

Lx5

X-/Y-axis motor
connectors

X-/Y-axis sensor
connectors

（54）

（45）

Y-axis ±OT/ZLS connector（45）
X-axis OT/ZLS connector

Lx5

133

54

（φ29）

1000 +1000 from the end of thestage base（40.5）

1000 +1000 from the end of the stage base

※４：When extension cables are used

※3：When extension cables are used54

X-/Y-axis sensor cables

Positive
direction

X-axis ±OT/ZLS
OT/ZLS connector

Positive
direction

Y-axisX-/Y-axis motor cables

STy2:St. between
mechanical stoppers

Negative
direction

Cables (with the selected cable length) are connected from theend of the stage base.

STy2:St. between
mechanical stoppers

X-/Y-axis sensor cables

STy1:Effective stroke

X-/Y-axis ±OT/ZLS cables※3：When no extension cables are used
STy1:Effective stroke

X-/Y-axis motor cables

X-/Y-axis ±OT/ZLS cables※４：When no extension cables are used

240

Lx2

260

Lx2

Hθ ※1
Bottom

Use direction ※2

8-M12 depth 24（Depth 18 only for twoplaces marked with ★）

P3
Ly4

Ly2

For fixing aworkspace

4-M16 depth 24

P2

P2
6-holes dia. 11,
counterbore dia.
17.5 depth 12 for fixing
the stage

H0

4-M8 depth 16
4-M10 depth 20

Ly5

Top

P3

H0

Ly6

Ly4

Hθ ※1

4-M12 depth 12 forfixing a workpiece

Bottom

Use direction ※2

Ly2

Ly5
Ly6

Top

4-M10 depth 15 forfixing a workpiece

N-holes dia. 14, counterbore dia.
20 depth 13 for fixing the stage

4-M8 depth 12 forfixing a workpiece
Ly1
Ly1
Ly3
Ly3

Ly3

420（table）

Ly3

270（table）

52
52※1：Hθ indicates the dimension when theτDISC Motor D250-40-F/FP (option) is mounted.
※2:This stage is mounted horizontally upward.
※3:For the extension cables, check the specifications of each selected type.

Tolerances not designated in the figure
Dimension

Notes) ・St. means stroke.
・In this figure, all axes are drawn at the center of the stroke.

□ XY Stage External Dimensions

Tolerance

Dimension

Tolerance

Dimension

ToleranceL≦6±0.1 30＜L≦120 ±0.3 315＜L≦1000 ±0.8

6＜L≦30±0.2 120＜L≦315 ±0.5 1000＜L≦2000 ±1.2

※Hole pitch tolerances not designated in the figure are all ±0.2.

※1：Hθ indicates the dimension when theτDISC Motor D400-40-F/FP (option) is mounted.
※2:This stage is mounted horizontally upward.
※3:No allowance for a bulging cableveyor is included.
※4:For the extension cables, check the specifications of each selected type.

Tolerances not designated in the figure
Dimension

Notes) ・St. means stroke.
・In this figure, all axes are drawn at the center of the stroke.

□ XY Stage External Dimensions

Tolerance

Dimension

Tolerance

Dimension±0.1 30＜L≦120 ±0.3 315＜L≦1000 ±0.8

6＜L≦30±0.2 120＜L≦315 ±0.5 1000＜L≦2000 ±1.2

※Hole pitch tolerances not designated in the figure are all ±0.2.

※117Model number NST-D Lx1

Lx2

Lx3

25B4/25A4APNA

600

165

760

30B4/30A4APNA

650

190

810

35B4/35A4APNA

700

215

860

Lx4

Lx5

185

160

Ly1

Ly2

Ly3

440

205

580
625
680

Ly4

Ly5

Ly6

P1

155

70

227.5 737.5

250

177.5

92.5

250

782.5

275

120

277.5 837.5

300

P2

P3

50

400

STx1 STx2 STy1 STy2

H0

Hθ

ToleranceL≦6※1

Model number NST-D Lx1

Lx2

280 1140

980

Lx3

125

140

125

140

50B5/40A5APNA

150

165

150

165 142±0.2 186.5±0.3

60B5/45A5APNA 1080 330 1240

175

190

175

190

Lx4

Lx5

175

160

Ly1
850
900

Ly2
700

Ly3

Ly4

Ly5

Ly6

N

215

75

230 1005

8

240

100

255 1055

10

P1
250

P2
115
40

P3 STx1 STx2 STy1 STy2
660

250

265

200

215

300

315

225

240

H0

Hθ

172±0.2 220.5±0.3

18τLinear

ＸYStageτLinearＸY Stage□ External Dimensions of the XY Stage (with Bellows)□ External Dimensions of the XY Stage (with Bellows)

NST−D10B3／10A3

NST−D20B3／20A3

STy1
STy1
Effective St. Effective St.

STy1:Effective St. STy1:Effective St.
STy2:St. between mechanical stoppers STy2:St. between mechanical stoppers

STy2
STy2
St. between
St. between
mechanical stoppers mechanical stoppers
Negative
direction Y-axis

Negative
direction

Y-axis

Ly3
Ly4

140

Ly2

Ly4

Ly5

P3

4-M10 depth 20 for
fixing a workpiece
4-M8 depth 16 forfixing a workpiece

STx1:Effective St. STx1:Effective St.

Positive
direction
Negative
direction

X-axis

Lx2

05
D2
C.
P.

4-M8 depth 16 forfixing a workpiece

P1

4-M8 depth 16 forfixing a workpiece

110
200

Lx5
Negative
direction

4-M10 depth 20 for
fixing a workpiece235（table）

STx2
STx2
St. between St. between
mechanical stoppersmechanical stoppers
Effective St. Effective St.
STx1
STx1

X-axis

05

D2

C.

P.

140
110

P2
H1※3

Ly1

Top

Ly5

Top
Use direction ※2

X-/Y-axis motor cables

X-/Y-axis sensor cablesTop※1：Hθ indicates the dimension when the τDISC Motor D170-40-F/FP (option) is mounted
and the value in parentheses indicates the dimension when the τDISC Motor D170100-F/FP is mounted.
※2:This stage is mounted horizontally upward.
※3:No allowance for a bulging cableveyor is included.
※4:For the extension cables, check the specifications of each selected type.

※4：When no extension cables are used

Notes) ・St. means stroke.
・In this figure, all axes are drawn at the center of each stroke.

□ XY Stage External Dimensions

10B3/10A3APJB

19

740 400150

30

Tolerance

Dimension

ToleranceL≦6±0.1 30＜L≦120 ±0.3 315＜L≦1000 ±0.8

6＜L≦30±0.2 120＜L≦315 ±0.5 1000＜L≦2000 ±1.2※3Model number NST-D Lx1 Lx2 Lx3 Lx4 Lx5 Lx6 Lx7 Lx8 Ly1 Ly2 Ly3 Ly4 Ly5 Ly6 P1 P2
120

Dimension※Hole pitch tolerances not designated in the figure are all ±0.2.
※3

10B3/10A3APJA

Tolerance

550 190 97.5 42
580 160 132.5 47

480 340 40

1055

130 30P3 STx1 STx2 STy1 STy2

112 150 50 300 50

65※4：When no extension cables are used

BottomTolerances not designated in the figure
Dimension（φ29）

200（table）

Bottom

Use direction ※2(40.5)※4：When extension cables are used

Ly1

Cables (with the selected cable
length) are connected from theend of the stage base.

Ly6※3200（table）

Cables (with the selectedcable length) are connectedfrom the end of the stage base.

Use direction ※2※4：When extension cables are used
Ly6※3

X-/Y-axis motor cables

BottomX-/Y-axis sensor cables

（φ29）

（54）

Lx4
6-holes dia. 9, counterbores dia.
14 depth 9 for fixing the stage

H0
Hθ※1

1000 +1000 from the end of the stage base(40.5)

H2

（45）

Top

X-/Y-axis motor connectors

Use direction ※2

X-/Y-axis sensor connectors

H1※3
Bottom（54）

Hθ※11000 +1000 from the end of the stage base

X-/Y-axis sensor connectors

6-holes dia. 9, counterbores dia.
14 depth 9 for fixing the stage

HO

（45）

H2

X-/Y-axis motor connectors

Lx4

P2

P1

4-M8 depth 16 forfixing a workpiece

110
200

Positive
direction

P1

Lx5
Lx2

235（table）

110

STx2:St. between
STx2:St. between
mechanical stoppers mechanical stoppers

P1

L×1

P2

L×7

Lx7

P2

Lx3

Lx3

Lx6

Lx6

L×8※3

P3

Lx8※3

Ly2

Lx1

Ly3

Positive
direction

Positive
direction

H0

※3

※1

H1

Hθ

50 65 132±0.2 228

176.5±0.3（236.5±0.3）※1：Hθ indicates the dimension when theτDISC Motor D170-040-F/FP (option) is mounted
and the value in parentheses indicates the dimension when the τDISC Motor D170100-F/FP is mounted.
※2:This stage is mounted horizontally upward.
※3:No allowance for a bulging cableveyor is included.
※4:For the extension cables, check the specifications of each selected type.
Notes) ・St. means stroke.
・In this figure, all axes are drawn at the center of each stroke.

□ XY Stage External Dimensions

84

20B3/20A3APJB

855 500

135
165

45

680 175 97.5

Dimension

Tolerance

Dimension

Tolerance±0.1 30＜L≦120 ±0.3 315＜L≦1000 ±0.8

6＜L≦30±0.2 120＜L≦315 ±0.5 1000＜L≦2000 ±1.2※3Model number NST-D Lx1 Lx2 Lx3 Lx4 Lx5 Lx6 Lx7 Lx8 Ly1 Ly2 Ly3 Ly4 Ly5 Ly6 P1
20B3/20A3APJA

Tolerance

L≦6※Hole pitch tolerances not designated in the figure are all ±0.2.
※3H2

Tolerances not designated in the figure
Dimension

44

710 145 132.5 49

600 340 100

105 55130 30※3

P2

P3 STx1 STx2 STy1 STy2

H0

H1

104 200 50 300 100 115 100 115 132±0.2 228※1Hθ
176.5±0.3（236.5±0.3）

H2
84

20

τLinear

ＸYStageτLinearＸY Stage□ External Dimensions of the XY Stage (with Bellows)□ External Dimensions of the XY Stage (with Bellows)

NST−D25B4／25A4
NST−D30B4／30A4
NST−D35B4／35A4

NST−D50B5／40A5
NST−D60B5／45A5

STy1：Effective St.

STy1：Effective St.

STy2：St. between mechanical stoppers

STy2：St. between mechanical stoppers

STy1:Effective St. STy1:Effective St.

Negative direction

STy2:St. between mechanical stoppers STy2:St. between mechanical stoppers

Ly3

Positive
direction

Positive direction
Ly4

Ly5

P3

Lx6

Y-axisY-axisLy2

Lx8※3

Negative
direction

Ly2

Ly4

Ly5
Lx2

Ly3

X-axis

320

Lx2

50

P1

Negative
direction

D4

C.

P.

4-M8 depth 16
4-M10 depth 20

STx1:Effective St.

Positive
direction

P1

200

Lx5

420（table）

Lx1

STx1:Effective St.
STx1:Effective St.

Positive
direction

P1

STx2:St. between
mechanical stoppers

X-axis
Negative
direction

110
140

Lx5

Lx2

110
140

STx2:St. between
mechanical stoppers

P1

Lx7
Lx1

270（table）

P.
C.
D
28
4

240

STx1:Effective St.

260

4-M12 depth 24 forfixing a workpiece

200
240

P2

4-M10 depth 20 for
fixing a workpiece

STx2:St. between mechanical stoppers

Lx7

4-M8 depth 16 forfixing a workpiece

STx2:St. between mechanical stoppers

Lx3

P1

Lx6

P2

Lx8※3

P3

4-M16 depth 24

P1

8-M12 depth 24

Top※4：When extension cables are usedTop

Notes) ・St. means stroke.
・In this figure, all axes are drawn at the center of each stroke.

□ XY Stage External Dimensions
25B4/25A4APJA
25B4/25A4APJB
30B4/30A4APJA
30B4/30A4APJB
35B4/35A4APJA
35B4/35A4APJB

21

890 600

945 650995 700

Lx3
120
150
125
155
125
155

Lx4
30

35

35

Lx5

Lx6

Lx7

750 14095

780 110 130
810 13595

840 105 130
860 135

Cables (with the selected cable
length) are connected from theend of the stage base.

Tolerance

Dimension95

890 105 130

Ly1 Ly2

Ly3

77

750

125

72

76

810 440 155

880

190

Ly4

Ly5

105

80

130

55

105 11013085

105 145130 120※4:When no extension cables are used

BottomTolerance

Dimension

ToleranceL≦6±0.1 30＜L≦120 ±0.3 315＜L≦1000 ±0.8

6＜L≦30±0.2 120＜L≦315 ±0.5 1000＜L≦2000 ±1.2

※3

Lx8

Top
Use direction ※2

X-/Y-axis motor cables※4：When no extension cables are used

※Hole pitch tolerances not designated in the figure are all ±0.2.
※3

Lx2420(table）

Tolerances not designated in the figure
Dimension

Model number NST-D Lx1

（φ29）

Ly1
X-/Y-axis sensor cables

Use direction ※2
Bottom※1：Hθ indicates the dimension when theτDISC Motor D250-40-F/FP (option) is mounted.
※2:This stage is mounted horizontally upward.
※3:No allowance for a bulging cableveyor is included.
※4:For the extension cables, check the specifications of each selected type.

(40.5)※4：When extension cables are used
Cables (with the selectedcable length) are connectedfrom the end of the stage base.

Ly1
270（table）（54）

Use direction ※2（45）

Bottom（φ29）

1000+1000from the end of the stage base

P2
H1※3

X-/Y-axis motor cables

Ly6※3(40.5)

Hθ※1

X-/Y-axis motor connectors

TopN-holes dia. 14,
counterbores dia.
20 depth 13 for
fixing the stage

H0

X-/Y-axis sensor cables

Use direction ※2

H2

X-/Y-axis sensor
connectors

Bottom

（54）

H1※3

（45）

X-/Y-axis sensor connectors

Hθ※1

X-/Y-axis motor connectors

H0

Lx4

6-holes dia. 11, counterbores dia.
17.5 depth 12 for fixing the stage

H2

1000 +1000 from the end of the stage base

Lx4

P2

（Depth 18 only for twoplaces marked with ★）

Ly6

P1

P2

P3 STx1 STx2 STy1 STy2

58

250

50

125 140 125 140

H0

※3

※1

H1

Hθ

H2

※1：Hθ indicates the dimension when theτDISC Motor D400-40-F/FP (option) is mounted.
※2:This stage is mounted horizontally upward.
※3:No allowance for a bulging cableveyor is included.
※4:For the extension cables, check the specifications of each selected type.
Notes) ・St. means stroke.
・In this figure, all axes are drawn at the center of each stroke.

※3

41

275

300

50

50

400 150 165 150 165 152±0.2 240 196.5±0.3 103

175 190 175 190

50B5/40A5APJB

1265 980

170

60B5/45A5APJA 1375 1080 150
60B5/45A5APJB

180

50

60

Dimension

Tolerance

Dimension

Tolerance±0.1 30＜L≦120 ±0.3 315＜L≦1000 ±0.8

6＜L≦30±0.2 120＜L≦315 ±0.5 1000＜L≦2000 ±1.2※3Model number NST-D Lx1 Lx2 Lx3 Lx4 Lx5 Lx6 Lx7 Lx8 Ly1 Ly2 Ly3 Ly4 Ly5140

Tolerance

L≦6※Hole pitch tolerances not designated in the figure are all ±0.2.

□ XY Stage External Dimensions
50B5/40A5APJA

47

Tolerances not designated in the figure
Dimension

1170 9585

1200 651201290 85851320 55120

140

75 1040700
77 1100170

105 95130 70105 125130 100

N

P1 P2

8

250 115

P3 STx1 STx2 STy1 STy2

※3

※1

H1

Hθ

H2

250 265 200 215
172±0.2 253 220.5±0.3 118

660
10 250 40

H0300 315 225 240

22

OptionStandard Stage Options□ Standard Stage Options

Bellows option※You can select and add the following items according to your specifications as standard stage options.

●Adding θ-axis, bellows, and machine accuracy measurement options●Selecting encoder type (resolution), cable length, and cableveyor
θ-axis option

You can mount a high precision direct drive servo motor, τDISC motor, on the θ-axis on the X or XY stage.

The following table listsτDISC motors that can be mounted on each X or XY stage model.
XY stage NST-D

X stage NST-A
10B3/10A3＊＊

Stage

All models

20B3/20A3＊＊

25B4/25A4＊＊
30B4/30A4＊＊

60B5/45A5＊＊

D170-040-F(P)D170-040-F(P)D170-100-F(P)D170-100-F(P)D250-040-F(P)D400-040-F(P)※ If you want to mount anotherτDISC motor, contact our sales representative.

τDISC motor model numbers NMR-

D170-100-F

D250-040-F

D400-040-F

D170-040-FP

D170-100-FP

D250-040-FP

D400-040-FP

FDDBA2D-201A

FDFBA2C-701A

FEDBA2C-401A

FFDBA2C-801A

FDDBA2D-201AP

FDFBA2C-701AP

FEDBA2C-401AP

FFDBA2C-801AP

N･m

7.5

22.5

20.7

67

Maximum torque

N･m

22.5

67

62（51.75 ※1）

134

Detection pulses

ppr

Choose from among ４００,０００, １,０００,０００, ２,０００,０００, and ４,０００,０００.
5 (at ４００,０００, １,０００,０００, or ２,０００,０００ ppr)
2.5 (at ４,０００,０００ ppr)

Choose from among ９００,０００, １,８００,０００, ３,６００,０００, and ７,２００,０００.

Rated speed(based on the number of detection pulses)

rps

Rated output

W

235

700

400

800

Rated current

A

2.1

4.8

3.4

6.3

Available
driverVPS series
Main power supplykg

You can specify each machine accuracy option to guarantee the relevant accuracy.

For the value of each accuracy, see "Stage Machine Specifications" on pp. 5-6 for【X stage】or "Stage Machine
Specifications" on pp. 11-12 for【XY stage】.
(Note that when a machine accuracy option is not specified, the listed value of the relevant accuracy is not obtained.)●Speed variation option : Customized individually depending on the use conditions (including the speed and load).
※ If you want to use a higher precision product or another accuracy option, contact our sales representative.

Encoder type (resolution) selection You can select an encoder type and resolution.
For details of the encoder types and resolution for【X stage】, see "Stage Machine Specifications" on pp. 5-6. For
details of the encoder types and resolution for【XY stage】, see "Stage Machine Specifications" on pp. 11-12.

３ (at ９００,０００, １,８００,０００, or ３,６００,０００ ppr) ２ (at ９００,０００, １,８００,０００, or ３,６００,０００ ppr)
１.５ (at ７,２００,０００ ppr)
１.５ (at ７,２００,０００ ppr)

Both magnetic pole sensor and automatic magnetic pole detection available

Automatic magnetic pole detection method

VCⅡseries

Machine accuracy options●Attitude accuracy option (pitch/yaw)

D170-040-F

Rated torque

Mass

Caution: ① A bellows does not have a mechanically perfect protection structure. Periodically open the bellows and clean the inside.
② Note that you cannot add a bellows after purchasing a standard stage.
③ The maximum allowable speed of the stage with bellows is 1.6 m/s.
The stage can be used only horizontally upward.

●Positioning accuracy option□τDISC Motor Specifications
τDISC motor types

A bellows option provides the following protection: "Preventing nonmagnetic materials at least 5 mm in diameter fromentering the stage".
For the outline of the stage to which a bellows option is added, see "External Dimensions of the X Stage with Bellows"on p.8 for【X stage】or "External Dimensions of the XY Stage (with Bellows)" on pp. 19-22 for【XY stage】.
For a stage with bellows, the absolute type of linear encoder is available.
For the XY stage, two types of bellows options are available according to the cableveyor size.

50B5/40A5＊＊

35B4/35A4＊＊
Available τDISC motor type

You can add a bellows option to protect the stage from foreign matters.

5.5

13.0

9.5

28.0

□DA□A2A-401B□DA□A2A-801B□DA□A2A-401B□DA□A2A-801B

DC□0A2B-401B

DC□0A2B-801B

DC□0A2B-401B

DC□0A2B-801B

NCR−
200 to 230 VAC 50/60 Hz Three-phase power supply (single-phase for VPS series NCR-DC□0A2B-401B)※ For type D＊＊＊-＊＊＊FP ofτDISC motor, the high precision machining specification with a radial/axial runout of up to 10 μm is applied.
※ Note that adding aτDISC motor changes the mass of the moving portion along each axis.
※ For the outline of eachτDISC motor, see "External DimensionsτDISC Motors for the θ-Axis" on pp. 29-30.
※ For details ofτDISC motor specifications, refer to theτDISC Brochure.
※1: When a VPS series driver is used

23

24

OptionStandard Stage Options
Cableveyor selection

You can select a medium- or large-size cableveyor according to additional wiring for【X/Xθ stage】【XY/XYθ stage】

You can choose between the following two types of cableveyors: Medium-size (type C) and large-type (type D).

Low-profile type (available only for a stage without bellows:Type G)

Medium size (type C)

Large size (type D)

Model 2500.05.055 manufactured by IGUS, low-dust specification(Bending radius R = 55 mm, for the capacity, see the figure below.)

Model 2500.09.055 manufactured by IGUS, low-dust specification(Bending radius R = 55 mm, for the capacity, see the figure below.)

57
（15）

your system and, for the XY stage, you can also select a low-profile type with no top projecting part.

This type of cableveyor does not have any stage component at a position higher than the top of the table.
You can efficiently use the space above the stage.
≪Rough drawing of the XYθstage with low-profile type cableveyors≫

89

（22）

（15）

（15）

（54）

Cableveyor for the Y-axis

（15）
11.25

Y-axis

Cross-section of the large-size cableveyor (type D)

the X-axis

X-axis

Bending radius R

25

Cableveyor for

11.25

Bending radius R

Cross-section of the medium-size cableveyor (type C)

25

11.25

11.25

θ-axisFor detail dimensions, see pp. 16-18.

≪Rough drawing of the XYθstage with medium- or large-size cableveyors≫
Cableveyor for the Y-axis

θ-axis【XY/XYθ stage】
Without bellows: You can choose from among the following three types of cableveyors: Medium-size (type A), large-type (type B), and low-profile type (type G).
With bellows: You can choose between the following two types of cableveyors: Medium-size (type E) and large-type (type F).

Y-axisCableveyor for
the X-axis
X-axisMedium size (without bellows:Type A with bellows:Type E)

For detail dimensions, see pp. 13-15.

X-axis:Model 2500.07.055 manufactured by IGUS, low-dust specification Y-axis:Model 2500.05.055 manufactured by IGUS, low-dust specification(Bending radius R = 55 mm, for the capacity, see the figure below.)(Bending radius R = 55 mm, for the capacity, see the figure below.)（15）

X-axis:Model B15.07.038 manufactured by IGUS, low-dust specification(Bending radius R = 38 mm, for the capacity, see the figure below.)

Y-axis:Model B17.03.048 manufactured by IGUS, low-dust specification(Bending radius R = 48 mm, for the capacity, see the figure below.)
Bending radius R
32

Bending radius R

25

11.25

Bending radius R

15
（31）

（35）

（31）

89

※ You can move the vertical partitions at any place as long as the horizontal partition can be held with balance.

Bending radius R

15

（42）

15

（9）

77
（15）

（15）

38

※ When adding cables by yourself, be careful about the bending radius and capacity of the cableveyor.

Y-axis:Model B17.03.048 manufactured by IGUS, low-dust specification(Bending radius R = 48 mm, for the capacity, see the figure below.)
32

Bending radius R※ For the size of each type of cableveyor when mounted on the stage, see "External Dimensions" on pp. 6-7.

NST-D60B5/45A5PNA

X-axis:Model 2500.07.055 manufactured by IGUS, low-dust specification(Bending radius R = 55 mm, for the capacity, see the figure below.)
Bending radius R

Cross-section of the large-size cableveyor for the Y-axis (type B/F)

25

11.25

Bending radius R

25

11.25
Cross-section of the large-size cableveyor for the X-axis (type B/F)

②Applicable stage models
NST-D50B5/40A5APNA

（15）

25

（54）

Cross-section of the low-profile type cableveyor for the Y-axis (type G)

11.25

（15）

（15）

11.25

（68）

11.25

（15）

Cross-section of the low-profile type cableveyor for the X-axis (type G)

11.25

103

（9）

Bending radius R

Large size (without bellows:Type B with bellows:Type F)
Y-axis:Model 2500.09.055 manufactured by IGUS, low-dust specification(Bending radius R = 55 mm, for the capacity, see the figure below.)

38

17.5

Cross-section of the medium-size cableveyor for the Y-axis (type A/E)

X-axis:Model 2500.10.055 manufactured by IGUS, low-dust specification(Bending radius R = 55 mm, for the capacity, see the figure below.)

15

100

Cross-section of the low-profile type cableveyor for the X-axis (type G)

（9）

25

11.25
Cross-section of the medium-size cableveyor for the X-axis (type A/E)

NST-D25B4/25A4APNA

（9）

（22）

NST-D20B3/20A3APNA
NST-D35B4/35A4APNA

（16）

（15）

（15）

11.25

（42）

11.25

（15）

57

（16）

77

①Applicable stage models
NST-D10B3/10A3APNA
NST-D30B4/30A4APNA

Cross-section of the low-profile type cableveyor for the Y-axis (type G)※ The cableveyor of this type has a smaller bending radius to lower the height. It generates more dust than other types since it is usedwith placed horizontally. Carefully use this type of cableveyor.
※ You can move the vertical partitions at any place as long as the horizontal partition can be held with balance.

25

26

OptionStandard Stage Options
Cable selection

You can select whether to use extension cables and the length of each of theencoder, motor, ±OT, and ZLS cables along each axis on the X/XY(θ) stage.

When no extension cables are used

When extension cables are used

●Rough drawing●Rough drawing
Cable length selection

Extension cable in the stage

Cable length selection※2

Encoder⑦：Encoder cable

Encoder①：Encoder cable

Magneticpole sensor⑥

Magneticpole sensor②：Motor cable⑨：Motor cable⑧

Coil unit

Coil unit
Servo driver

Servo driver③：＋OT cable⑩＋OT sensor＋OT sensor⑪：±OT and ZLS
cables−OT sensor④：−OT cable−OT sensor

ZLS※1⑤：ZLS cable
ZLS

Cableveyor

Cable connection section※1※1：For a one-axis X stage, wiring is connected directly from the stage base section not through the cableveyor.
※2:The cable length of each extension cable in the stage is 1000 mm from the end of the stage base.

Cableveyor※1：For a one-axis X stage, wiring is connected directly from the stage base section not through the cableveyor.

Linear stage main unit

●FeaturesLinear stage main unit

●Features

・There is no connection section on the wiring path, so cables can fit into an appropriate section.
・A cable must be replaced throughout its length when required.

●Selecting each cable・Only the faulty section of a cable needs to be replaced when required, which makes replacement easy.
・There is a connection section on the wiring path, so some space is required for the section.

●Selecting each cable①：Encoder cable②：Motor cable⑥⑦：Encoder cables⑧⑨：Motor cables

Encoder type

Encodercable length

Cable model
you order

Shield required?

Motor cable length
for linear/θ-axis

Cable model
you order

Encoder type

Encodercable length

Cable models
you order

INC
tape scale

3・5
10・15mNCR-XBCMA−□□□（About 9.5 mm）

No

3・5・10・15
20・30 mNCR-XBBBA−□□□(About 6.5 mm)

INC
tape scale

3・5・10m

NCR-XBG1A−050(About 9.5 mm)+

NCR-XBG5A−□□□(About 9.5 mm)

INC
glass scale

3・5・10m

NCR-XBCZA−□□□（About 9.5 mm）

Yes

3・5・10・15
20・30 mNCR-XBBCA−□□□(About 7 mm)

INC
glass scale

3・5・10m

NCR-XBG2A−050(About 9.5 mm)+

NCR-XBG5A−□□□(About 9.5 mm)

ABS

3・5・10・15
20・30mNCR-XBCPA−□□□（About 8.5 mm）

ABS

3・5・10・15
20・30mNCR-XBG3A−050(About 8.5 mm)+

NCR-XBCPA−□□□(About 8.5 mm)

θ-axis（τDISC）

3・5
10・15mNCR-XBCNA−□□□（About 9.5 mm）

θ-axis（τDISC）

3・5・10m

NCR-XBG4A−050(About 9.5 mm)+

NCR-XBG5A−□□□(About 9.5 mm)

Motor cable length
for linear/θ-axis

Cable models
you order

3・5・10・15
20・30mNCR-XBEHA−050(About 7 mm)

Shielded

Extension cable in the stage+

NCR-XBEAA−□□□(About 7 mm)

Extension cable in the stage③④：±OT cables

27⑤：ZLS cable⑩⑪：±OT and ZLS cables±OT
cable length

Cable model
you order

ZLS
cable length

Cable model
you order＋OT
3・5・10・15
20・30mNCR-XBA6A−□□□（About 5.5 mm）

3・5・10・15
20・30 mNCR-XBA8A−□□□（About 5.5 mm）−OT
3・5・10・15
20・30mNCR-XBA7A−□□□（About 5.5 mm）※ □□□ in the cable model number indicates the cable length. Example: 5m ⇒ 050※ The INC glass scale type of encoder is available only for the X stage.
※ Each cable is flex-resistant.
※ The value in parentheses under the cable model number indicates the finished outside diameter.
※ For the θ-axis, ±OT and ZLS sensors are not used.
※ Note that the system may not operate normally with a cable longer than the lengths listed above.

±OT and ZLS
cable length

3・5・10m

Cable models
you order
NCR-XBA9A−050(Three cables about 5 mm
in outside diameter are
bundled to connect themto the connector.)+

Extension cable in the stage

NCR-XBAAA−□□□(About 7 mm)※ □□□ in the cable model number indicates the cable length. Example: 5 m ⇒ 050※ The INC glass scale type of encoder is available only for the X stage.
※ Each cable is flex-resistant.
※ The value in parentheses under the cable model number indicates the finished outside diameter.
※ For the θ-axis, ±OT and ZLS sensors are not used.
※ Note that the system may not operate normally with a cable longer than the lengths listed above.

28

τDISC Motors fortheθ-Axis

External Dimensions ofτDISC Motors for the θ-Axis□ Type D170-040-F(P) Model NMR-FDDBA2D-201A(P)□ Type D250-040-F(P) Model NMR-FEDBA2C-401A(P)＋0.012＋0.012+20500 0

2−φ6H7 0

6-M5 depth 7 (equally spaced)

2−φ6H7 0

6-M6 depth 8 (equally spaced)

Depth 8 (equally spaced: Holes for positioning pins)

500

Depth 8 (equally spaced: Holes for positioning pins)+20
0

Rotating direction
Positive

Sensor and encoder connector

1
0.
±
86
φ

48

.
dia

Sensor and encoder connector

55°（Range：±2°
）

.8
38

φ
15
0±
0.
1

Position of
the zero point(Range：±2°
）

68

.8

(ro

.
dia

ing

tat

tion

p or

)

250±1.5

55
°
5
20
φ

Negative

Sensor and encoder cables

173±1

48

0

Position of thezero point

n)
rtio
po
ing
at
t
o
(r

25

Negative50

7
φ1

Positive46
φ2Rotating direction

Sensor and encoder cables

th 2
dep
dia.
110

75

(Rotating portion)

Motor cable

428
φ(Stationary portion)
5
R1（Rotating portion）

Motor cable（Stationary portion）

4-holes 11 dia. (equally spaced)

View from A (bottom)

+20

R2

5

173±1

4-holes 13 dia. (equally spaced)

2-hanging brackets

Motor connector※

Motor connector

Nameplate position

Detail of "B"0

φ162h7−0.040 (spigot joint）
65 dia. (bore diameter)C（rotating portion）0.5

20

1.5

⇧

（Inner diameter ofthe rotating portion）

43
10

41

44.5±0.1（rotating portion）0.5

43
1.5

10

A

.5

（Inner diameter of therotating portion）

0

⇧

B

Nameplate position

A※0.01 for high-precision machining specification type D170-040-FP□ Type D400-040-F(P) Model NMR-FFDBA2C-801A(P)＋0.012+200Detail of "B"※0.01 for high-precision machining specification type D250-040-FP□ Type D170-100-F(P) Model NMR-FDFBA2C-701A(P)500※

44.5±0.1.5（Bore diameter）

185 dia. (rotating portion)※3（spigot joint）

C0

φ35

254±1.5 dia. (outer diameter)

3.5

φ96h7−0.035 (spigot joint）

0.5

0

※

3.5

3（spigot joint）

108 dia. (rotating portion)

41

177.5 dia. (outer diameter)

View from A (bottom)
250±1.5

3

3

500

+20
0

0.5

500 0

2−φ6H7 0

6-M6 depth 10 (equally spaced)＋0.015

6-M8 depth 10 (equally spaced)
Depth 8 (equally spaced:Holes for positioning pins)

2−φ8H7 0+20

Depth 8 (equally spaced: Holes for positioning pins)

500 0

Rotating direction
Positive
Negative
Sensor and encoder cables

80

50

φ
86
±
0.
1

（Rotating portion）

dia

th

ep

.d

50

60
°

ot

. (r

68

(Range：±2°）

.8

dia

po

406±2

173±1

Sensor and encoder connector

Position of
the zero point

g

in
at

)

on

rti

φ
45
0

)
on
rti
po

30

55
°

22
36

.8
38

Position of
the zero point（Range：±2°
）

.
dia

g
tin
ta
(ro

1
0.
0±
22
φ

Sensor and encoder connector

0

5
20
φ

80

Negative7
φ1

Positive91
φ3

Rotating direction

Sensor and encoder cables

2

1

Motor cable
Motor cable（Stationary portion）（Rotating portion）

4-holes 11 dia. (equally spaced)（Stationary portion）

View from A (bottom)

2-hanging brackets

※
+20

0.5

0.5

⇧

B

A

48.5±0.1

Nameplate position※

3.5

65 dia.

45

3（spigot joint）

φ260h7(bore diameter)

10104.5±0.1

101（rotating portion）0.520103（Inner diameter of the rotating portion）

1.5

10

A

※

,5

⇧

0
−0.040 (spigot joint）

C0

Nameplate position

Detail of "B"

300 dia. (rotating portion)

20.5

406.4±2 dia. (outer diameter)

Detail of "B"（rotating portion）0.5

C0B

Motor connector

3.5

35 dia. (bore diameter)3（spigot joint）

0

φ96h7−0.035 (spigot joint）

406±2
3

3

500 0

108 dia. (rotating portion)※

4-holes 17 dia. (equally spaced)

2-hanging brackets

View from A (bottom)

177.8 dia. (outer diameter)

47
Inner diameter of（Innerthe rotating portion）
portion173±1

Motor connector

1.5

+20
0

0

500

5

R5

R1

※0.01 for high-precision machining specification type D400-040-FP※0.01 for high-precision machining specification type D170-100-FP

29

30

τLinear Stage Measurement Methods□ Accuracy Measurement Methods

Parallelism B

To measure accuracy of a multiaxis stage such as the XY stage, fix the axes other than the target axis formeasurement to the center position of the stroke, move only the target axis.
Measure accuracy in an environment at a temperature of 22℃±5℃.

Measuring parallelism B

Touch the contact of the test indicator fixed on the table to the stage
installation surface plate and move the table by the effective stroke
length. The maximum value is used as parallelism B.
Measuring devices：Precision surface plate and test indicator

Straightness A
Place a straight edge on the table, touch the contact of the test indicator fixed on the stage installation surface plateto the straight edge, and record values. Straightness A is obtained as follows: Connect the values of both ends when
the table is moved by the effective stroke length as a reference line. Determine an area enclosing all measurement
values that is made by two lines parallel to the reference line.
The shortest interval between the two parallel lines is straightness A.

Certificate
NIKKI
DENSO

Measurement items：Horizontal and vertical directions

Measuring straightness A

Measuring devices：Straight edge and test indicator

Measuring straightness

Repetitive positioning accuracy

Displacement

Test indicator

Straight edge

Straightness
Table

Certificate
NIKKI
DENSO

Position

Precision
surface plate

Repeat positioning from a point in the same direction and measure the stop position seventimes. Then, obtain 1/2 of the maximum reading difference. Perform this measurement at
the center and at both almost ends of the travel distance of the effective stroke length inprinciple. The maximum value that is obtainedis assumed to be the measurement value.
Place the reflecting lens at the center of thetable and the spectroscopic lens on the installation surface plate to perform measurement.

Measurement value ：＝±1／2｛ｍａｘ（Ｐ1,Ｐ2･･･Ｐ6,Ｐ7）−ｍｉｎ（Ｐ1,Ｐ2･･･Ｐ6,Ｐ7）｝
Measuring device：Laser length measuring machine

Measuring repetitive positioning accuracySpectroscopic lens

Straightness B

Reflecting lensPlace a straight edge on the surface plate, touch the contact of the test indicator fixed on the table to the straightedge, and record values. Straightness B is obtained as follows: Connect the values of both ends when the table is
moved by the effective stroke length as a reference line. Determine an area enclosing all measurement values that is
made by two lines parallel to the reference line. The shortest interval between the two parallel lines is straightness B.
Measurement items：Horizontal and vertical directions
Measuring devices：Straight edge and test indicator

Measuring straightness B

Measuring straightness

Displacement

Repetitive positioning measurement pattern
P1

Straightness
P2

P3

・
・
・

Certificate
NIKKI
DENSO

P7

Position

Squareness A

Positioning accuracy

Measuring device ：Laser length measuring machine

Absolute value|⊿L2|

Measuring squareness A

Measuring positioning accuracy

Absolute value|⊿L1|

Square master

Measuring devices：Square master and test indicator

Sequentially perform positioning in the same direction
within the effective stroke. Obtain the difference between
the measurement value and specified value at each position. Positioning accuracy is indicated by the absolutevalue of the maximum difference.
Place the reflecting lens at the center of the table and thespectroscopic lens on the installation surface plate to perform measurement.
Error

Fix a square master on the table based on the axis having the shorter stroke and attach the test indicator perpendicular to the reference moving axis. The maximum reading within the travel distance of that axis is assumed to besquareness A.
The measurement distance is up to 150 mm for reasons of the size of the square master. To measure a longer distance, convert the value measured for 150 mm to the value for the stroke of the target axis by calculating it as the ratio of the stroke to 150 mm.

The figure indicating measuring positioning
accuracy is the same as "Measuring repetitive
positioning accuracy".

Certificate
NIKKI
DENSO

31

Specified position32τLinear Stage Measurement Methods

Zero Point of the X/XY Stage, and Zero Point Deceleration and Overtravel Sensors

Lost motion
First, perform positioning to a point in the positive direction and measure the position. Move the stage in the same
positive direction with the same positioning command, perform positioning from that point in the negative position withthe same command, and measure the position. Then, move the stage in the negative position with a positioning command, move it in the positive direction with the same command, perform positioning in the positive direction, and measure the position.
Repeat this operation and measurement seven times in each of the positive and negative directions. Obtain the average of the positioning stop positions. Perform this measurement at the center and at both almost ends of the travel
distance of the effective stroke length. The maximum value that is obtained is assumed to be the lost motion measurement value.
Place the reflecting lens at the center of the table and the spectroscopic lens on the installation surface plate to perform measurement.

To fine-tune the position of the zero point, set the zero point set distance (offset distance)
when using a VCⅡ series driver together or set the zero point offset distance from the master controller when using a VPS series driver.
When you specify the incremental (INC) type of encoder①Zero return operation
The "OT return and zero return method" is recommended for zero return operation.
When a VCⅡ driver is used together, a built-in OT return and zero return function is provided.
When you specify zero return operation from the master controller, OT return and zero return operation is also recommended.

Measurement value＝｜1／7（Ｐ+1,Ｐ+2･･･Ｐ+6,Ｐ+7）−1／7（Ｐ-1,Ｐ-2･･･Ｐ-6,Ｐ-7）｜ｍａｘ
Measuring device：Laser length measuring machine
The figure indicating measuring lost motion is the same as "Measuring repetitive positioning accuracy".

Lost motion measurement pattern②Position of the zero point
As the position of the zero point along each of the X- and Y-axes, a zero point marker is mechanically set roughly at
the center of the relevant effective stroke.

P+1

To fine-tune the position of the zero point, set the zero point distance parameter (zero point offset distance) in the
P1-1

VCⅡ driver when using the OT return and zero return function on the VCⅡ driver. Set the zero point offset distanceP+2

from the master controller when specifying zero return operation on the controller.

P-2

Repetitive zero point positioning accuracy is equivalent to repetitive positioning accuracy listed in the X/XY stage

P+3

machine specifications only for zero return from one direction.

P-3

・
・
・

③Zero point deceleration and overtravel sensors
Along each axis on the stage, a zero point deceleration (ZLS) sensor and forward/reverse overtravel (±OT) sensors

P+7

are mounted and connected.
P-7

Sensor model number: PM-Y54 (output can be selected between light on and dark on.) manufactured by SUNX.
※The ±OT sensors are connected in the light-on mode and the ZLS sensors are connected in the dark-on mode.

Each sensor is mounted in the position shown below on the sensor rail. You can loosen the fixing bolt to move theAttitude accuracy

Measuring device：Laser length measuring machine
The figure indicating measuring lost motion is thesame as "Measuring repetitive positioning accuracy".

±OT：Position 5 mm apart from each end of the effective stroke in the positive direction

Measuring attitude accuracy

ZLS：Position 30 mm or more apart from the position of the zero point in the negative direction※The position of the ZLS sensor is adjusted so that forward zero return is enabled.
Stroke between mechanical stoppers/2

Attitude accuracy P- P

Measurement items：Pitch and yaw angles

sensor to a desired position and adjust the position.

Displacement

Sequentially perform positioning in the same direction within
the effective stroke and measure the value at each position.
Attitude accuracy is indicated by the maximum obtained
difference.
Place the reflecting lens at the center of the table and thespectroscopic lens on the installation surface plate to performmeasurement.

（5）

Stroke between mechanical stoppers/2

Effective stroke/2

Effective stroke/2（5）（30 or more）

Zero point

Specified position

−OT

ZLS

＋OT

Speed variation
Measuring speed variation

When you specify the absolute (ABS) type of encoder

Speed

Move the stage at any speed you specify and measure
the travel distance at sampling intervals. Obtain the
speed during a minute interval using the measured travel
distance during the sampling interval and the sampling interval. Divide the maximum speed difference during theconstant speed interval by the specified speed V0. The
speed variation is 1/2 of the obtained value with ｱ that isexpressed in percentage. Place the reflecting lens at thecenter of the table and the spectroscopic lens on the in- Specified
stallation surface plate to perform measurement.
speed①Position of the zero point
As the position of the zero point along each of the X- and Y-axes, the absolute position of the zero point iselectrically set roughly at the center of the relevant effective stroke.
Repetitive zero point positioning accuracy is equivalent to repetitive positioning accuracy listed in the X/XY stage
machine specifications only for zero return from one direction.

Measurement value＝±｛（Ｖmax−Ｖmin）／Ｖ0／2×100｝％ （VO）
Measuring device：Laser length measuring machine
The figure indicating measuring lost motion is thesame as "Measuring repetitive positioning accuracy".

②Zero point deceleration and overtravel sensors
The ZLS and ±OT sensors are not required for the absolute type of encoder.
(Vmax-Vmin)

Time

33

34

Acceptance Inspection, Delivery, and Warranty

Required Specification List
Fill out the list according to the required specifications of the linear stage you order.

Acceptance inspection

Place a check mark in □ and write a required item in parentheses.
Delivery of the product you ordered to the place you specified after various types of measurement in our factory is

For an unknown or unnecessary item, leave the field blank.

assumed to be acceptance inspection.
Date of entry: Year

Delivery and caution at delivery

Month

Day

Application and device name （The product you ordered is delivered to the place
you specified on a free-on-truck basis.

Stage axis configuration□ 1axisTable dimensions

W：（）mm × L：（

）mm

W：（

）mm × L：（）mm × H：（

Cableveyor□ Included

To lift the product, use the hanging brackets
supplied with the product.

External dimensions

Use a balance crane jig (see the figure below)）

Balance crane jig (provided by the customer)□

Driving axis

and lift the product vertically as much as
possible so that wire ropes do not interfere withItem

the product.

Effective stroke (OT not included)

With a precision maintenance baseUser precision JIS class ̲̲̲ mountMaximum speed

（

）mm/s

（

）mm/s

）
μm

（

）
μm

are not intended to be used in any equipment or system that may be involved with human life.
For this reason, Nikki Denso assumes no responsibility if our product is used for any other application than we intend.
(Examples: Applications in equipment and systems for atomic, aerospace, medical, and passenger vehicles that
may greatly be involved with human-life and assets)●

the system.
●

When the motor is used in an environment in which sulfur or sulfidizing gas is generated, a chip resistor may becorroded and broken and a contact failure may occur.

（

）
μm

（

）
μm

（

）
μm

（

）
μm

（

）
μm

□ Parallelism B （

）
μm

（

）
μm

□ Parallelism A

Table flatness

・Operation time (acceleration)
・Whether to require ZLS/OT sensors,
positions, whether to require wiring
・Allowance of the cableveyor(for additional customer wiring)・Linear guide specifications
Whether to require precompression,
sealing, and surface treatment
Materials, grease※Accuracy only required for the part, not accuracy after assembly.

Attitudeaccuracy

Operationaccuracy

Pitching

（

）asec

（

）asec

Yawing

（

）asec

（

）asec

（sampling Hz）

＠（Tracking accuracy (position error)±（）％）mm/s、（）Hz ＠（

±（

）
μm

±（

）％

）mm/s、
（

）Hz

±（

）
μm

Load (such as the mass of a workpiece)
Load direction, load condition, etc.

（(

）Direction、(（±（

Lost motion（

Encoder resolution（

and emergency brake (dynamic brake)

Positioning accuracy (absolute value)

（

）ppr

（

）rps

）asec/（

）deg

Axial

（

）
μm

Radial（）μm

Parallelism（

Moment rigidity（

Load (such as the mass of a workpiece)）N)・Positioning accuracy on theτDISC table, operation time(acceleration)）deg ・Materials, surface treatment, finishing・Bearing specifications）asec(Whether to require precompression, sealing, andsurface treatment, materials, grease)）asec）asec/p or（

Maximum speed

Load when stopped (external force, etc.)(Raydent, electroless nickel plating, etc.)
・Whether to require a magnetic pole sensor

Check items

θ

Repetitive positioning accuracy

Load direction, load condition, etc.

(Al, copper, steel)・Surface treatment)

Driving axis

Runout・Materials of the stage）kg(

Load and direction when stopped (external force, etc.)

If you want to install the product on a device for which a serious accident or loss may occur by a motor failure or
external noise higher than the specified noise resistance level, install an appropriate backup or failsafe function in）
μm

Vertical

Rotation angle

Our products have been designed and manufactured for general-purpose applications in the general industry and（Horizontal

Item

●

・Whether to require a mounting base）μm

If you find a failure or abnormality during or not during the warranty period, contact our sales representative.

Cautionand clean environment supported)

）
μm

）
μm/p

Speed variation

be induced by a failure of the delivered product, is excluded from the warranty.

（

・Use environment (general atmosphere（②Improper use different from the description in this manualThis warranty shall cover only repair of the main unit of the product. Any damage and loss of chance at your side, which will

）mm

）
μm/p

However, note that failures and abnormalities resulting from the following causes are not covered by this warranty:⑤Change in the dimension of a part with age, failure due to the life of the product, and replacement of consumable parts）mm

Check items

±（

）
μm
（

Parallelism④Improper connection with any manufacturer's product not approved by Nikki Denso

）axes

（

Warranty③Natural disasters□Others（

Scale resolution

Straightness①Repair by a manufacturer other than Nikki Denso or modifications by the customer

XYθ-axes（

Squareness (based on the shorter stroke)

The warranty period for our product is one year from the date of shipment or 3000 operation hours, whichever comes first.

□□Not included

）mm

±（

Positioning accuracy (absolute value)

Crane operation is recommended.

Xθ-axesY（

Lost motion

Product (stage)□

X

Repetitive positioning accuracy

Hanging bracket(supplied with the product)

XY-axes●Write other requirements and outline drawing if any.

）μm
）N・m/rad

（
(

）kg
)

（

）N

■ Company

35■ Department■ Person in charge■ e-mail

■ TEL

36

Servo Drivers

Custom-made stages
Nikki Denso provides stages tailored to the needs of each customer.
◎Semi-custom-made stages

AC Servo driver/controller

Based on a standard stage, the following items are customized.

VC II Series●Changes the stroke, linear motor, linear scale, non-standard θ-axis, linear guide, position of the zero
point, table/base mounting holes, surface treatment, materials, top table size, cableveyor, etc.
● Increases machine precision/dynamic precision.

◎Custom-made stages
Nikki Denso provides special specification stages including a multi-head stage, long stroke
stage, and stage with a mount.

Sample custom-made stages

VCⅡ- Type D

High performance servo driver series thatmaximizes motor performance from high response operation to ultralow operation"Versatile servo driver series" including thecontroller type with the program positioning
control function (VCⅡ-C1) or free curve control function (VCⅡ-C6)
Stage positioning accuracy ensured by using
the absolute position compensation function
optionHigh performance driver
Pulse train control, speed control, torque control,
simple positioning, and mode selection

VCⅡ-Type C1□High precision X-axis stage
Stroke：400 mm

Program positioning controller
Built-in program positioning, speed, torque,and other functions

Positioning precision：0.2 μm
Repetitive positioning precision：±0.1 μm
Straightness：(Vertical) 1.5 μm (Horizontal) 2.5 μm

VCⅡ-Type C6Free curve controller
Free curve motion enabled□X-axis gantry stage + gantry control system/
Y-axis three-head stage
Gantry synchronization accuracy：At servo lock: 0.1 μm●RoHS satisfied

During driving at 100 mm/sec：0.7 μm●Conforming to CE marking (all models) and UL/cUL (up to 800 W)●Network-compatible (option)
Gantrycontroller
One axis is managed fromthe master controller.

Field network：≪CC-Lｉ
ｎｋ≫・≪DeviceNet≫
Motion network：≪SSCNETⅢ≫・≪MECHATROLINK-Ⅲ≫

Bidirectional
communication
Synchronous control
Gantry control：Synchronous control system
which enables two synchronous axes
to be controlled as one axis

AC Servo driverHigh quality stage
Nikki Denso has excellent measuring environment systems to always
provide high-quality, high precision stages to the customers.
Measurement room：Vibration-absorbing floor
Temperature-controlled room（22℃ ±0.5℃）
Three-dimensional measurement system (manufactured by TOKYO SEIMITSU)
Model XYZAX SVA FUSION 9/10/6

VPS Series

Servo driver series developed in pursuit ofuser friendliness and cost performance
Equipped with 7-point positioning and zero
return functions as standard
Stage positioning accuracy ensured by using
the absolute position compensation function
optionI/O type
Laser measurement system (manufactured by Renishaw)
Model ML 10

CC-Link type
Equipped with a CC-Link interface as standard●RoHS satisfied●Conforming to CE marking and UL/cUL

37

38

AC Servo driver/controller

VC II Series

VCⅡ Series□ Explanation of theModel Number

ＮCR - D D A 0 A2 A - 401 B - T99□ Function Specifications
Item①② ③ ④ ⑤

⑥

⑧

⑦

⑨

⑩

Specification
VCⅡ-C1（NCR-CDA1）VCⅡ-D（NCR-DDA0）

Type
Number of controlled axes

① AC servo driver/controller series name
Encoder feedback input frequency② Product type

D：Driver type③ Series name

D：VCⅡseries④ Model type

A：τlinear/τDISC motor B：Synchronous AC servo motor C：Induction AC servo motor⑤ Function type

0：Driver function 1：Positioning control function

C：Controller type

⑥ Input power specification

A1：100 VAC system A2：200 VAC system⑦ Design order

A→B→C･･･

Run mode

VCⅡ- type D/C1
Pulse train command（Starting with A）

VCⅡ- type C6
Command input system

None：Synchronous/induction AC servo motor⑨ Available motor

Master axis position command

None：Standard specification

Analog command

T＊＊：Special specification

Internal command
Common to each type

□ General Specifications
Item

Main functions

For each typeOperating temperature：0℃ to 55℃

Humidity

Altitude≪Line driver or open collector output (option) available. However, the line driver method is recommended for reasons of noise.≫≪Maximum input frequency: 6.25 Mpps≫④Servo control communication

Mounted on a panel

Vibration resistance

0.5G（10〜50Hz）

Impact resistance

5G⑤Internal master axis command

Speed control run and torque control run
DC -10V〜 +10V、input resolution

-

14bit

Simple positioning/zero return/manual run

Program run with 280 internal stored data itemswith internal pulse train commands(addresses 0 to 255 set by control signals)

Zero return run, manual (jog) run, serial communication run, self-diagnosis, torque limit, and electronic thermal

positioning, and pulse train

Pulse train run, program run, (positioning, simple continuous positioning,
external trigger positioning, four arithmetic/logic operations, timer,
unconditional/conditional jump, subroutine, and spinner control), electric gear
ratio set, and backlash compensation
Program run (continuous control) Program run (free curve control)

Do not install the stage in any harmful atmosphere such as corrosive gas, cutting oil, metal dust, or oil.

Mounting orientation≪Maximum input frequency:5 Mpps≫≪Be careful about noise since the same GND is used for the line receiver input≫

Linear acceleration/deceleration and S-curve acceleration/deceleration

Auto-tuning function

Available, by parameter setting, even when the inertia ratio is a little highGain selection function②Can also select position loop gain.

Control input signals

FT/B：±2000 V (Frequency: 5/100 kHz Cycle: 300 ms) for one minute(external input signals, eight basic signals)

Radiation noise：±1000 V (50 ns, 10 cm) for one minute①Can select four types of gain by combining GSEL signals.

Servo ON (SON(＊)), reset (RST), mode select (MD1 and MD2), command pulse input inhibit (CIH(＊)),
emergency stop (EMG＊), proportion control (PC), forward jog (FJOG), reverse jog (RJOG), zero point
deceleration (ZLS), speed override (OR1 to OR4), deviation clear (CLR), forward overtravel (FOT＊),
reverse overtravel (ROT＊), gain select (GSEL), gain select 2 (GSEL2), forced brake ON (BRON), andtorque limit (TL)

When the capacity is 800 W or less：Natural cooling When the capacity is at least 1.2 kW：Forced air cooling

Noise tolerance

zero return, and servo lockAcceleration/deceleration pattern

1000 m or less

Cooling methodzero return, and pulse train

command compensation

85% or less with no condensation ※Installation place

Auto, manual,train control, and simple positioning

0℃ to 50℃（to comply with UL standards）
Storage temperature：20℃ to 60℃※

Ambient conditions

pulse frequency, however)Auto, manual,

Pulse train run, simple

Specification

Temperature

20 Mpps (quadruple of the encoder

Speed control, torque control, pulse-

B：Linear motor type NLA-M/N orτDISC motor C：τlinear motor type NLA-S D：τlinear motor type NVA/NLD⑩ Special specification

25 Mpps (quadruple of the encoder pulse frequency, however)①90°
different phase pulse ②Directional pulse ③Directional signal + feed pulse

6：Free curve control function

Upper two figures：Significant figures Lower one figure：Power of 10 Example）40 1=40×101= 400W

⑧ Output capacity

VCⅡ-C6（NCR-CDA6）

1※1

Electrostatic noise：±10 kVA (between the ground and housing)※：Avoid use under a high temperature or humidity condition since the life largely varies depending on the temperature and humidity conditions.

Auto start (PST), address set (PS1 to PS8), hold (HLD),
Drive (DR),external trigger (TRG), M complete (MFIN), program cancel (PCAN),

speed/torque select (SS1 and SS2),

block stop (BSTP), external auto start inhibit (EPIH), and jog speed change (JOSP)

simple positioning start (PST),

Command direction select (SSD)

Phase lead (D11), phase delay (D12),

address set (PS1 to PS3),

electronic clutch (D14), master axis

zero return (ORG), andselect (D18), cycle end (D21), patterncommand direction select (SSD)

select (D22/D24/D28), and internalmaster axis speed select (MSSP)□ Electrical Specifications

Servo ready (RDY), alarm (ALM(＊)), warning (WNG(＊)), positioning complete (PN), in torque limit (LIM),

Item
Model

NCR-□DA□A2A-101D

Output capacity
Input power supply

speed zero (SZ), break release (BRK), software limit switch (SLSA and SLSB), and encoder marker (OCM)

Specification

W

100

A□A2A-201D

A□A2A-401D

A□A2A-801D

200

400

800

Voltage specification

AC200〜230V、50／60Hz three-phase

Allowable voltage fluctuation

AC180〜242V、50／60Hz

Driving method

Three-phase sine wave PWM
0.6

1.1

1.8

Continuous output current Arms

1.1

2.0

3.4

5(6.8)※4

Instantaneous output current Arms

3.3

6.0

9.9

17.0

Control method

Semi-closed loop by encoder (linear sensor) feedback

Brake method

Regenerative braking：External regenerative resistor
ｋHz

Carrier frequency

Mass

※3

Accessories

1：5000

Mpps
5

5

5

kg

1.0

1.0

1.4

−

10

※1：The condition is that a motor does not stop with 100% load.
※2:Choose a circuit breaker model having a sufficient shutdown capacity that can conduct protective coordinate with the power supply capacity.
※3:When no option is attached※4:The rated current is 6.8 A when not comply with UL standards.

39

Operation and display functions

The LCD module on the front panel or optional SDI device allows the user to input various types of data and display various statuses.

Filter functions

Notch filter, torque command filter, disturbance compensation filter, and vibration filter

Monitor functions①Displays the control signal status in the signal display section on the LCD module on the front panel or optional SDI device.
②Displays various types of operation status and setting status (data), and detected error history in the data display section on
the LCD module on the front panel or optional SDI device.
③Analog monitor Two types of operation status (Can monitor two types of operation status selected using the relevant
parameter.)④USB-compatible. Can monitor various types of data using a dedicated editor (option).

Data retention function

Retains the following data in non-volatile memory. (The non-volatile memory can be rewritten up to 10000 times.): Parameters and alarm
history (The last five history items are retained. If any of the five items is the same as the last generated alarm, it is not registered.)Protective functions

Provided against the following items: IPM fault, overvoltage, undervoltage, overspeed, overload (electronic thermal), overloadon the regenerative resistor, deviation overflow, communication, error, data error, CPU fault, encoder fault, automatic magnetic
pole detection error, absolute encoder fault, etc.

2.4
Regenerative resistor (see p.42.)

Electronic clutch stop (FCRP),
in free curve run (FC),master axis speed zero (MSZ),
in servo lock (PMOD)

90ｰ different phase pulse train output (can be output at a divided frequency. The maximum output frequency of thetwo signals, phase A and B signals, is 20 Mpps when the encoder pulse frequency is quadrupled.)

20A

In pulse train run (PMOD)

Encoder pulse output

25※1

Maximum speed frequency
Circuit breakerin torque run (TMOD),and in pulse train run (PMOD)

0.3（rated current）※2

In speed run (SMOD),※1

in simple positioning run (NMOD),kVAPower capacity (at rated output)

Speed control range

Output signals (four basic signals)

Rough matching (PRF), program end (PEND),
auto run ready (PRDY), in manual run (MMOD),in auto run (AMOD), in zero return run (HMOD), M strobe (MSTB),
general output (OUT1 to OUT8), and M output (MO1 to MO80)

Communication functions

Can transmit and receive various types of data by serial communication (RS-422A).
Can communicate with the dedicated editor through USB (compliant with the 1.1 and 2.0 standards).

※1:For the initial signals assigned for eight external input and four output signals, see "External Connection Diagram" on p.41.
For other than the initial signals, signals can be assigned by remote control or external I/O signal assignment.
An asterisk (＊) attached to a signal code indicates negative logic. An asterisk (＊) enclosed with parentheses indicates a signal of which logic can be changed
by parameters.

40

AC Servo driver/controller

VC II Series

VCⅡ Series□ VCⅡSeries External Connection Diagram□ VCⅡSeries External Dimensions
※1

V

Motor
V

Frame ground pin
W

FG

R

Pulse train command

B2

FC＊

7

FC

26

FC＊

25
24

9

23

10

21

11

RC
RC＊
GND

RC＊
GND

2

CN1

Line driver+5〜-12v

8

12

D24
D28

13

DI3

35
34

14

DI4

33

DI5

32
31

DI6
DI7

15
16

G

A

A

A＊

H

B

C

B＊

J

Z

B

Z＊

I

SD＊

+5V

SD

GND

PS

PS

PS＊

PS＊

PC

PC

PC＊

PC＊

DO1

FC

DO2

DO3 WNG WNG
DO4 PN

PN

MSZ

DO3

5.5

5.5

5.5※1

65※1

※2
Magnetic pole sensor

NCR-□DA□A2A-801□

119(114)※2

CN1

FCRP

151

（9.5）

Encoder

PG

29

Control output
signals
DO2 ALM ALM

36(40)※330

DI8

DO1 RDY RDY

24

16

CR
CR

DO4

8

EA

7

EA*

6

EB

5

EB*

4

EM

3

EM*

17

CR

15
14

CR

COM

13

TQH
GND

1
2

INH
GND

19
20

10

31

Analog monitor
10

MON2

24
36(40)※3

160

（9.5）

GND
11
27

FG

MON1
J1

FG

GND
Connector andFG metal fitting

Connector andFG metal fitting

Serial communication (RS-422A)J3

TXD(A) 7

+D

2
3

GND

4

TXD(B) 8※1：Indicates the dimension of the VCⅡseries main unit.
※2：Indicates the dimension of the VCⅡ series when CC-Link and DeviceNetinterface unit options are attached. The value in parentheses indicatesthe dimension when the additional control I/O unit is attached.
※3：The value in parentheses indicates the dimension of the projecting
connector when the additional control I/O unit is attached.

5.5

120Ω

USB
communication

10

GND

9

Analog command

79

Encoder pulse output

190

MD1 MD1MD2 MD2

5
36

GND

5

DI7
DI8

RST
SON
DR
CIH
SS1

6

18
DI1
DI2

F

15

DI6

RST D11
SON D12PST D14FJOG D18
RJOG DI21
SS2 ZLS
D22

DI1
DI2
DI3
DI4
DI5

+V（+12〜24V）

24

E

180

Control input
signals
Initial signals assigned for each type
VCⅡ-D
-C1
-C6

24

GND

1

Regenerative resistor

Ｍ

160

Open collector(option)Connector andFG metal fitting

EP5

4

B1

151

（9.5）

EP5

3

Surge killer

77
36(40)※3

E
CN2

Motor regenerative resistor

MC

89(84)※2
24

190

ON MC

25

W

Frame ground pin

Class D grounding (former class 3 grounding)
Thermostat

25

160

s

79(74)※2

U

5

U

190

r

180

AC200/220V
50/60Hz

15

DBC

T

180

S

NCR-□DA□A2A-401□

5

DBK

15

R

■VCⅡmain unit
NCR-□DA□A2A-201□

160

MC

Dynamic brake unit

VCⅡ

MFB

95※1

RXD(A) 1
GND
Connector andFG metal fitting

RXD(B) 2
GND

J2

3

■Dynamic brake unit (option)
NCR-XABCA2B-801-UL■Accessory of the NCR-□DA□A2A-801□
Regenerative resistor（60W／82Ω）

FG
Connector andFG metal fitting

Servo control communication (RS-485)
DT 3 , 7
DT＊4 , 8

（11）

35

74

CK 1 , 5
CK＊2 , 6

30
30

10

4

100

112

4.3

15

20

When an ABS encoder is used12

Connector andFG metal fitting

5

FG

100

Absolute encoder
FG
3
4
1
2
5
6

EP5

+5V

EP5

+5V

GND

GND

GND

GND

SD

RQ/DT

SD＊

RQ/DT

PG

Temperature detector
and thermostat (screw-in)

Regenerative
resistor thermostat base※Optional for the NCR-□DA□A2A-201□／401□

41

5
6.
φ

120

115

40

Notes）・Prepare a power supply at the specified voltage and current for the control input signals.
・In connector CN1, COM is common to control I/O signals and GND is common to the internal control power
supply (+5 V).
・COM and GND in CN1 are isolated, so do not put them in common cables or bundles.
・The status of the switch connected to each control input signal indicates the OFF condition of the signal.
・Pins not described in this diagram are NC.
・Connect GND for the pulse train command when the line receiver is input.

FG

Connector andFG metal fitting

10.5 3※1：The dynamic brake unit is optional.
※2：Connected when a magnetic pole sensor is used.

CN2

4.5

42

AC Servo driver/controller

AC Servo driver

VC II Series

VCⅡ Series□ Configuration of VCⅡ Options
VCⅡunitVPS Series

VPS Series□ Explanation of theModel Number

ＮCR - DCCO A2 B - 401 D - S（T）99①

Ｊ
３

USB cable (commercially available one)

② Editor③ Communication cable (RS-232C)

③

④

⑤

⑥

⑦

② Product type

DCC0：I/O specification type DCD0：CC-Link specification type

③ Input power specification

A1：100 VAC system④ Design order

A→B→C･･･ （Starting with A）⑤ Output capacity

Upper two figures：Significant figures Lower one figure：Power of 10 Example）40 1 =40×101= 400W

A2：200 VAC system

A：NA80/800 series AC servo motor and serial encoder④ Communication cable (RS-422)Ｊ１②① AC servo driver/controller series name

Type B plug

Type A plug

① SDI Device data setting/status display unit

B：NA80/800 series AC servo motor and 90°different phase pulse encoder
C：τlinear series and IPU separate encoder⑥ Available motor⑤ Communication connector kit

D：τlinear series and 90°different phase pulse encoderand encoder type
⑥ I/O terminal block cableＣ
Ｎ
１

E：τDISC series and IPU separate encoder⑦ Terminal
block unit

F：τDISC series and 90ｰ different phase pulse encoder⑧ I/O cable (open-end)

G：τlinear series and ABS linear scale⑦ Special specification

None：Standard specification S（T）＊＊：Special specification

Power supply and motor
connection terminal⑨ I/O connector kit⑩ Zero-phasereactor

Item

Specification
Temperature

Ambient
conditions
Network connection units⑲ Terminal
block unit

ＣＮ
３

Humidity

Storage temperature：20℃ to 60℃※

85% or less with no condensation

Installation place⑲ Terminal
block unit

⑱ I/O terminal block cable⑰ Additional
control
I/O unit□ General Specifications⑫ Dynamic brakeunit

Operating temperature：0℃ to 55℃⑬ to ⑯
Network
interface units

Main unit options⑪ Chokecoil

Altitude

Do not install the stage in any harmful atmosphere such as corrosive gas, cutting oil, metal dust, or oil.
1000 m or less

Cooling method

When the capacity is 800 W or less：Natural cooling When the capacity is at least 1.6 kW：Forced air cooling

Mounting orientation

Mounted on a panel

Vibration resistance

0.5G（10〜50Hz）

Impact resistance

5G⑳ I/O cable (open-end)

Line noise：2000 V (50 ns, 1 μs) for one minute□ VCⅡSeries Options

Noise tolerance

Part name/specification①

Model number

SDI Device data setting/status display unit

NCR-XCM000

English version

NCR-XCN000

PC editor③

Communication cable (RS-232C)

NCR-XBF1A-□□□

Cable lengths：1m、3m、5m、10m④

Communication cable (RS-422)

NCR-XBF5A-□□□

Cable lengths：1m、3m、5m、10m⑤

Communication connector kit

NCR-XBDPA⑥

I/O terminal block cable

NCR-XBA2A-□□□

Cable lengths：1m,2m,3m

ZTB-400

40 terminals

NCR-XABND3A

40 terminals⑦

Terminal block unit

Cage clamp

NCR-XABQD3A

Required to insert multiple cables into one terminal.

I/O cable

NCR-XBA1A-□□□

Cable lengths：1m, 2m, and 3m Open at either end⑨

I/O connector kit

CSZ-INF⑩

Zero-phase reactor for protection against noise

NCR-XAB4A

For the common mode⑪

Choke coil for protection against noise

NCR-XAC2A

For the normal mode Connected to U, V, and W in series.

⑫

Dynamic brake unit

NCR-XABCA2A-801-UL⑭⑮⑯

CC-Link interface unit
DeviceNet interface unit
MECHATROLINK-Ⅲ interface unit
SSCNETⅢ interface unit

Main unit option
Main unit option
Main unit option
Main unit option⑰

Additional control I/O unit 1⑱

I/O terminal block cable for additional control I/O unit 1⑲⑳

I/O terminal block unit for
additional control I/O unit 1

Main unit option

Screw-inCage clamp

I/O cable for additional control I/O unit 1□ Electrical Specifications
Item

⑧

⑬

43

※：Avoid use under a high temperature or humidity condition since the life largely varies depending on the temperature and humidity conditions.

②

Screw-inElectrostatic noise 10 kVA (between the ground and housing)

Description

NCR-XAA1D1A

Japanese version

Radiation noise：1000 V (50 ns, 10 cm) for one minute

Model

Specification
NCR-DC

Output capacity□0A2B-401□
W

Voltage specification

Input power supply

Allowable voltage fluctuation□0A2B-801□

400
AC200〜230V、50／60Hz

800
single-phase

AC200〜230V、50／60Hz

AC180〜242V、50／60Hz

Driving method

Three-phase sine wave PWM

Power capacity (at rated output)

kVA

0.92

1.8

For external dimensions, see p.42.

Continuous output current Arms

3.5

6.8

NCR-XAB7D1A-201/401

Applicable VCⅡ unit：NCR-＊A＊-051/101/201/401

Instantaneous output current Arms

8.75

17

NCR-XAB7D1A-801

Applicable VCⅡ unit：NCR-＊A2＊-801

NCR-XAB6D1A-201/401

Applicable VCⅡ unit：NCR-＊A＊-051/101/201/401

NCR-XAB6D1A-801

Applicable VCⅡ unit：NCR-＊A2＊-801

NCR-XABPD1A-201/401

Applicable VCⅡ unit：NCR-＊A＊-051/101/201/401

NCR-XABPD1A-801

Applicable VCⅡ unit：NCR-＊A2＊-801

NCR-XABLD1A-201/401

Applicable VCⅡ unit：NCR-＊A＊-051/101/201/401

NCR-XABLD1A-801

Applicable VCⅡ unit：NCR-＊A2＊-801

NCR-XAA2D1A-201/401

Applicable VCⅡ unit：NCR-＊A＊-051/101/201/401

NCR-XAA2D1A-801

Applicable VCⅡ unit：NCR-＊A2＊-801

FTTC-□□□

Cable lengths：1m,2m,3m

ZTB-500／ZTB-200

50 terminals/20 terminals

NCR-XABPD3A／XABMD3A

50 terminals/20 terminals

NCR-XABQD3A

Required to insert multiple cables into one terminal.

NCR-XBA3A-□□□

Cable lengths：1m, 2m, and 3m Open at either end※ □□□ in the cable model number indicates the cable length. Example：5m ⇒ 050※ The main unit options are incorporated to the VCⅡ unit at shipment.
※ For external dimensions and details of each optional product, refer to "VC/VCⅡ Series Option Manual".

Control method

Semi-closed loop by encoder (linear sensor) feedback

Brake method
Carrier frequency
Speed control range

Regenerative braking：External regenerative resistor
ｋHz

10

※1

1：2000Maximum speed frequency Mpps
Circuit breaker(rated current) ※2
Mass
Accessories

three-phase

AC180〜242V、50／60Hz

16

A

5

kg

Approx. 1.0

Approx. 1.5−

Regenerative resistor (see p.47.)

10※1：The condition is that a motor does not stop with 100% load.
※2:Choose a circuit breaker model having a sufficient shutdown capacity that can conduct protective coordinate with the power supply capacity.

44

AC Servo driver

VPS Series

VPS Series□ VPS Function Specifications□ VPS Series External Connection Diagram
Specification
I/O specification (NCR-DCC0)

Type
Number of controlled axes

VPS

NFB

CC-Link specification (NCR-DCD0)MC

Run mode

S

DBC

Speed control and pulse train②Directional pulse

command≪Line driver output available. The maximum input frequency is 4 Mpps.≫

Class D grounding(former class 3 grounding)In the single-phase mode,
phase S is not connected.

③Directional signal + feed pulse

Speed control run
DC -10V〜 +10V、input resolution

Frame ground pin

AC200/220V
50/60Hz①90°
different phase pulse

input system Analog command

DBK

T

16 Mpps (quadruple of the encoder pulse frequency, however)

Pulse train
CommandR

1

Encoder feedback
input frequency※1

MC

Thermostat

ON

U
V

CN2

Surge killer

Speed control run, pulse train run, zero return run, manual (jog) run, torque limit, self-diagnosis,

R

Main functions

Gain selection function

Control input signals(eight external input signals)※※

Speed gain switching among three types (normal, low-speed, and change with GSEL)
Drive (DR), servo ON (SON(＊)), reset (RST), mode select (MD), command pulse input inhibit (CIH),
emergency stop (EMG), command select (SS1 to SS3), forward jog (FJ), reverse jog (RJ),
zero point deceleration (ZLS), forward overtravel (FOT), reverse overtravel (ROT), gain select (GSEL),
torque limit (TL), internal pulse start (ZST), zero point marker (ZMK), command direction reverse (RVS),
and command data reflection inhibit (NRF)

Encoder pulse output
Operation and display functions
Filter functions

18

9

36

10
11
12

Pulse train command
Line driver
FC
FC＊

-

6

Connector andFG metal fitting

FG

Ready (RDY), alarm (ALM), deviation range A (PNA), deviation range B (PNB), speed zero (SZ),
break release (BRK), marker output (OCEM), in emergency stop (EMG0), and zero return complete (HCP)
-

EP5

EP5

GND
GND

GND

A

A

A＊

A＊

B

B

B＊

B＊

Z

Z

Z＊

Z＊

SD＊

+5V

SD

GND

13

PS

PS

14

PS＊

PS＊

31

15

PC

PC

GND

PC＊

PC＊

5

16

DI1(DR)
DI2(SON)
DI3(TL)19
20
21

DI4(RST)
DI5(GSEL)
DI6(MD)

22
23
24
25
26

-D

3

+D

4

GND
Connector
metal fitting

GND

Encoder pulse output

CN1
5,6

3

CR

DO3(PNA)

4CR

DO2(ALM＊)

7

CR
CR

DO4(PNB)

overcurrent on the regenerative resistor, deviation overflow, RAM error, encoder fault, magnetic pole detection error, DSP error, etc.

8

EB

33

EB*

16

EM

34

EM*

Pulse train command
Line driver
FC
FC＊
RC
RC＊
GND

1
8
2
9
10

Control input signals+V（+12〜24V）

1
2

RXD(A)7

TXD(A)8

TXD(B)

3

GND

4

+5V

RXD(B)

FG
Connector
metal fitting

When an ABS encoder is used

4
5
13

COM

CN2
CR

FG

11
CR

DO2

Connector
metal fitting

6

DI1(EMG)
DI2

Control output signals
DO1(ALM＊)

Connector
metal fitting

General communication signals

FG※：For the initial signals assigned for eight input and four output signals, see "External Connection Diagram" on p.46.
※：For other than the initial signals, signals can be assigned by external I/O signal assignment or can be used for communication and CC-Link.
(For CC-Link, OCEM can be used only as an external output signal.)※：The status of control input signals can be fixed.
※：The logic of control output signals other than OCEM can be changed when they are assigned as external output signals.

GND

35

When the CC-Link specification type is used

Can communicate with the dedicated editor through USB (compliant with the 1.1 and 2.0 standards).
CN1

EA*

15

FG

Can display the last five alarm history items.
Can transmit and receive various types of data by serial communication (RS-422A) or CC-Link.

EA

14
32

Control output signals
DO1(RDY)

FG

3
4
1

TB3

2
DA

1

5

DB

2

6

DG

3
4 SLD
5 SLD

Connector andFG metal fitting

Absolute encoderFG

12

Connector
metal fitting

45※2
Magnetic pole sensor

USB

J2
2

Notch filter and torque command filter

and parameter status on the data display LEDs (four 7-segment LEDs) on the front panel.

Encoder
ＰＧ

1,2

DI7(CIH)
DI8(RVS)The operation panel on the front panel allows the user to display various statuses, edit parameters, and execute self diagnosis.

EP5

RC
RC＊

+V（+12〜24V）

Provided against the following items: IPM fault, overvoltage, undervoltage, overspeed, overload(electronic thermal),Communication functions

W

11
29
12
30

Control input signals②USB-compatible. Can monitor various types of data using a dedicated editor (option).

Protective functions

8

INH①Displays a selected item including alarms, speed, torque, deviation, speed command input, input signals,
Monitor functions

2

GND

Current position data output request (APRQ),

90°different phase pulse train output (can be output at a divided frequency.
The maximum output frequency of the two signals, phase A and B signals, is
7.99 Mpps when the encoder pulse frequency is quadrupled.)

B2

1

Analog speed command

and ABS data output request (ABRQ)
Output signals (four basic signals)

47Linear acceleration/deceleration and S-curve acceleration/deceleration (by using the command averaging function)

alarm code output request (ALRQ),

B1

Regenerative resistor(option)
CN1

When the I/O specification type is usedelectronic thermal, and auto-tuning function
Acceleration/deceleration pattern

Ｍ

FG

13bit

Positioning (7 points)/zero return/manual run with internal pulse train commands

Motor

V

Frame ground pin

Motor regenerative resistor

MC

-

U

W

3

Internal command

Dynamic brake unit

Item

EP5

+5V

EP5

+5V

GND

GND

GND

GND

SD

RQ/DT

SD＊

RQ/DT

PG

※1:The dynamic brake unit is optional.
※2:Connected when a magnetic pole sensor is used.
Notes）・Prepare a power supply (+V) for the control input signals.
・The control I/O signal name enclosed in parentheses indicates the signal assigned by the initial
parameter setting.
・In connector CN1, COM is common to control I/O signals and GND is common to the internal
control power supply.
・COM and GND in CN1 are isolated, so do not put them in common cables or bundles.

46

AC Servo driver

VPS Series

VPS Series□ VPS Series External Dimensions□ Configuration of VPS Options① Editor●I/O specification type VPS unit

■VPS unit
NCR-DC□0A2B-401□Ｊ
２5Type B plug

132

37

12.7

50

Type A plug

VPS unit
9.5

USB cable (commercially available one)

② Communication cable (RS-232C)③ Communication cable (RS-422)

Ｊ
１

124.6

150

145

155

5.5

④ Communication connector kit⑤ I/O terminal block cable
Ｃ
Ｎ
１

12.7

5

5.5

35

⑥ Terminal
block unit

⑦ I/O cable (open-end)

Power supply and motor
connection terminal⑧ I/O connector kit

NCR-DC□0A2B-801□
9.5

88⑪ Zero-phasereactor⑫ Chokecoil⑬ Dynamic brake
unit

132

5

37

① Editor●CC-Link specification type VPS unit
5.5

150

150

145

Ｊ
２

Type B plug

Type A plug

VPS unit
USB cable (commercially available one)

⑨ I/O cable (open-end)
Ｃ
Ｎ
１

5

⑩ I/O connector kit

35

38

50

Ｔ
Ｂ
３

CC-Link cable
Another CC-Link connection unit

Power supply and motor
connection terminal

5.5※The above figures show the I/O specification type. (The dimensions of the CC-Link type are the same.)⑪ Zero-phasereactor⑫ Chokecoil⑬ Dynamic brakeunit■Dynamic brake unit (option)
NCR-XABCA2B-801-UL■Accessory of the NCR-DC□0A2B-801□
Regenerative resistor（60W／82Ω）□ VPS Series Options
（11）

35
30

Part name/specification

30

100

Regenerative resistor thermostat base

4.5

※Optional for the NCR-DC□0A2B-401□

120

100

10.5 340

Temperature detector
and thermostat (screw-in)

5
6.
φ

112

115

Model number
Japanese version

NCR-XCB000

English version

NCR-XCE000

Description①

PC editor②

Communication cable (RS-232C)

NCR-XBF1A-□□□

Cable lengths：1m、3m、5m、10m③

Communication cable (RS-422)

NCR-XBF5A-□□□

Cable lengths：1m、3m、5m、10m④

Communication connector kit

NCR-XBDPA⑤

I/O terminal block cable (for the I/O specification type VPS unit)

4

10

4.3

20

5

15
12

74

⑥

Terminal block unit
(for the I/O specification type VPS unit)

Screw-inCage clamp

ZTTC-□□□

Cable lengths：1m、3m

ZTB-400

40 terminals

NCR-XABND3A

40 terminals

NCR-XABQD3A

Required to insert multiple cables into one terminal.
Cable lengths：2m and 3m⑦

I/O cable (for the I/O specification type VPS unit)

ZIC-□□□⑧

I/O connector kit (for the I/O specification type VPS unit)

CSZ-INF⑨

I/O cable (for the CC-Link specification type VPS unit)

NCR-XBA5A-□□□⑩

I/O connector kit (for the CC-Link specification type VPS unit)

ZCK-COM⑪

Zero-phase reactor for protection against noise

NCR-XAB4A

For the common mode⑫

Choke coil for protection against noise

NCR-XAC2A

For the normal mode Connected to U, V, and W in series.

⑬

Dynamic brake unit

NCR-XABCA2A-801-UL

For external dimensions, see p.47.

Open at either end

Cable lengths：1m, 2m and 3m

Open at either end※ □□□ in the cable model number indicates the cable length. Example：5m ⇒ 050※ For external dimensions and details of each optional product, refer to "VPS Series Option Manual".

47

48

Another Linear Stage

Direct Drive Product Lineups
Nikki Denso Offers
First direct drive servo motor that has satisfied stable performance at low speed, high takt
operation, stable driving with high inertia, and other needs
τDISC Series developed as a pioneer pursuing performance

Linear Transfer Stage

Stage Block【D series】

Low-profile highperformance typeHigh torque type【HD series】 Fast response type

■ Pursuing cost performance by adopting a scaleless linear sensor
Specifications when a scaleless linear sensor is used

◎ Costs significantly reduced◎ Environment resistance improved

Features

Overwhelming thickness of 44.5 mm that is provided by high magnetic flux
density High performance direct drive servo motor having exceptionallystable performance at low speed and machine accuracy including runout.
Rated torque 2〜200N・m
Applications Wafer chamfering, precision θ-axis, camera platform, electronic
drawing machine, and so on
High torque direct drive servo motor which achieves stable
Featurespositioning with high inertia loadRated torque 500〜1500N・m
Applications （Maximum torque：1000 to 3000N・m）
Large liquid crystal substrate alignment, roll coater, screen
printer, and so on

Features

Rated torque
Applications【ND-c series】 Standard type
【ND series】

Features

Rated torque
Applications◎ Sensor resolution: 40/8192 μm (4.883 μm)

Fast response direct drive servo motor developed in pursuit offast response performance with excellent stability that satisfies
both high torque and low inertia structures in a higher state andhas high motor rigidity
21〜115N・m
High-speed indexing, handler, and so on
Standard type direct drive servo motor optimum for transfer,
positioning, indexing, and other applications. Lineup also
includes the absolute encoder type.
2.4〜500N・m
Liquid crystal transfer, index device, picking and placement, and so on◎ Repetitive positioning accuracy: ±10 μm◎ Lost motion: 10 μm

Round Operation Type◎ Optical and magnetic linear encoders also available to bring out higher precision
Limited operation angle type

Unique round type linear servo motor for which magnets are mounted only at the required angle
Direct drive servo motor optimum for alignment applications
Features■ Effective stroke selectable from 100 to 1140 mm◎ Rich in variation, effective stroke selectable from 100 to 1140 mm and rated thrust
selectable from 95／200 N

Operation radius
Applications
One-rotation available typeFeatures◎ Lineup including the long stroke type (effective stroke selectable from 1140 to 21320 mm)
Operation radius
Application■ XY/Xθ/XYθ stage easily configured by combining the Stage Block andlow-profile direct drive motorτDISC series

LinearStage Blocks can be combined to configure an XY stage.
An Xθ/XYθ stage can also be configured by mounting low-profile direct drive motor τDISC ser-

Circular operation only within the required operation angle enabled by
combining arc magnet bases. Direct drive servo motor optimum forhigh precision positioning with high inertia load including alignment of alarge FPD substrate by direct driving within the required angle.
825mm/1525mm
Large liquid crystal substrate alignment device
Round type direct drive servo motor capable of one rotation byconnecting eight 45-degree magnet bases
In this case, the bore radius is 250 mm, which is optimum for driving
requiring a hollow structure.
178mm
Wafer inspection device, liquid crystal substrate alignment device, and so onτlinear series capable of high precision and fast operation
Rich lineup allowing the user to choose a servo motor from various angles including
operation specifications, thrust, and stroke.

ies in combination with Stage Blocks.
Coreless typeFeaturesLinear servo motor which satisfies both excellent stable performance at low speed and high speed operation.
Several types are available including the flat type having a straddle mounted slide structure and high-thrust
type which provides high thrust in 70% of the conventional model space by reviewing the magnetic alignment.

Rated thrustApplications

7〜1000N
Wire bonder, connector manufacturing device, high precision measurement device, and so on

Features

High thrust density provides large thrust.
Linear servo motor optimum for high-speed positioning of high mass load since the motor driving
section has high rigidity
250〜1500N
Large substrate transfer, laser beam machine, electronic drawing device, and so on

Core type

Rated thrustApplications

For details, refer to the Stage Block Brochure.

49

For details of each series, refer to the brochure of each product.

50

SAFE

Details of Warranty

Warranty period of our products is one year after shipment from our factory.
However, please note that any failure or abnormality resulting from the following causes will not be covered by thewarranty.
◎ Modiﬁcation by parties other than CKD Nikki Denso.
◎ Any non-standard operation that is diﬀerent from rules and regulations stipulated by this catalog or our manual.
◎ Natural disasters.
◎ Connection with another maker's unit which is not approved by CKD Nikki Denso.
Warranty of the device is limited for repairing only. Any damage caused by the fault of delivered device, or lost
opportunity on the customer's side, proﬁt loss, secondary damage, and accident will not be covered.

！ Cautions◎ The products may be damaged if it is hit or dropped. Please handle carefully.
◎ Please make sure to install the safety device in case the product is used in the system that may have a serious
accident or loss if the product is failed.
◎ Since the unexpected noise, electrostatic, or incase of abnormal failure of input power source, wiring, and parts may
be occurred although we put our eﬀort to keep the product quality, please consider the fail-safe design and the safety
in the range of movement before use.
◎ Please read the instruction manual carefully and understand fully before use the product.
Also, please pay attention to the cautions mentioned in the manual.
◎ In the product, strong magnets are used. Please do not stand near by the product if you have the pace maker device
in the heart in order to avoid serious accident.
◎ Please make sure to unplug the all power supply cables before installing, checking, and maintenance of the
product. Also, please make sure to take measures such as safety plug or locking the power supply cables to avoid
re-inputting the power other than the operator.

WebsiteReprint without permission is forbidden

Overseas sales dept.
1-4-2, Osaku, Sakura-shi, Chiba, 285-0802, Japan

TEL：+81-43-498-2315

FAX：+81-43-498-4654

TEL：+81-4４-８５５-４３１１

FAX：+81-4４-８５6-4831

E-mail：overseas@nikkidenso.co.jp
Head oﬃce
2-8-24, Arima, Miyamae-ku, Kawasaki-shi, Kanagawa, 216-0003, Japan

Overseas oﬃces◎China Representative Oﬃce in Shanghai
CKD Nikki Denso Co., Ltd. Shanghai Representative
Rm.1607B, Floor16, Feidiao International Building, 1065 Zhaojiabang Road, Shanghai, 200-030, China

TEL：+86-21- 5178-1342

Overseas Group Companies
D311,Centroad,323 Incheon Tower-Daero, Yeonsu-Gu, Incheon, 22007, Korea

TEL：+82-32-831-2133,2155 FAX：+82-32- 831-2166●"τDISC" , "τLinear" , "Servo compass", and "τENGINE" are the registered brand of CKD Nikki Denso Co., Ltd.●SSCNETⅢ/H, SSCNETⅢ, and CC-Link are the registered trademark of
Mitsubishi Electric.●EtherCAT® is registered trademark and patented technology, licensed by Beckhoﬀ Automation GmbH, Germany.●MECHATROLINK is the trademark of
MECHATROLINK MEMBERS ASSOCIATION.●Please make sure to have suﬃcient preliminary review and necessary export
procedure. If the end user of this product is considered as militarily related for the purpose of manufacturing the weapons, it will be
the subject of export controls ruled by Foreign Exchange and Foreign Trade Control Law.●The speciﬁcations, rating, or dimensionsof products in this catalog may be changed without notice for the improvement.●Although we carefully editing this catalogs, weare not responsible for any damage caused by errors and omissions.