Press Release
Sept. 10, 2020
Association of Asia-Pacific Physical Societies (AAPPS)
Division of Plasma Physics (AAPPS-DPP)

AAPPS-DPP Plasma Innovation Prize– Professor Masaru Hori is selected as Second Laureate –The Division of Plasma Physics (Chair: Mitsuru Kikuchi) under the Associationof Asia Pacific Physical Societies (President: Jun’ichi Yokoyama) selected Professor
Masaru Hori of Nagoya University as the second Laureates of AAPPS-DPP Plasma
Innovation Prize, which is awarded to scientists who have made seminal / pioneering
contributions in the field of plasma applications, focusing on impacts on industry. Heis the first Laureate from Japan.

Citations
Masaru Hori: “For his outstanding contributions to diverse range of applied andfundamental plasma science and technology using low-temperature plasmas, inparticular, for the carbon film mask technology development for plasma etching forsemiconductor manufacturing technologies; for invention and commercialization ofultra-compact atomic radicals measurement equipment and high-density radical
source for radical controlled plasma processing and synthesis for functionalizedmaterials; and for discoveries related to the use of plasma activated medium/lactic inplasma medicine for selective killing of various cancer cells.”
Contact points：
AAPPS-DPP Chairman and CEO, Mitsuru Kikuchi(AAPPS-DPP Association Inc.)
TEL: +81-80-115-3482, E-mail: aapps.dpp.ceo@gmail.com
AAPPS-DPP Executive Officer, Haruo Nagai
TEL: 080-1096-4575
AAPPS-DPP Homepage Address：http://aappsdpp.org/AAPPSDPPF/index.html

1

Press Release
On the achievements of Professor Masaru Hori
Prof. Masaru Hori was born in Gifu, Japan, in 1958, received his Ph. D atNagoya University in 1986. After working at Toshiba Corporation ULSI
laboratory from 1986 to 1992, he returned to Nagoya University. Since 2004,
he has been Professor of the Nagoya University. Now, he is a Director ofCenter for Low-temperature Plasma Sciences in Nagoya University.
Prof. Masaru Hori has accomplished 6 big inventions for plasma process
innovations. Firstly, he invented the carbon film as a mask material for
plasma etching in the semiconductor manufacturing at 1992. Thistechnology has become an essential technology for the current CMOS device
Prof. Masaru Horimanufacturing, and it is no exaggeration to say that AI and 5G could not berealized without this technology.
Secondly, he invented an ultracompact atomic radicals (H, O, N, C, F) measurement equipmentwith vacuum ultraviolet absorption spectroscopy. By using this equipment, he measured absolutedensities of H, O, N, C and F atoms for the first time in the reactive plasma processes. He succeeded in
elucidating their reactions mechanisms, and made numerous groundbreaking innovative discoveries,
opening the field of "Radical-controlled plasma processing" ahead of the world.
Thirdly, Dr. Hori and Dr. Hiramatsu invented a novel method of Carbon
Nanowalls (CNWs) with a radical injection plasma chemical vapor
deposition (CVD) without any catalyst for the first time in 2004. Theirpatents of 28 registrations with 62 applications on the CNWs. Theirinventions opened a new avenue in CNWs technologies and industries.
Fourthly, he is the inventor of High-Density Radical Source (HRDS) witha guarantee of the absolute radical density applied for GaN epitaxial growth
in MBE and discovered the high rate growths of GaN and InGaN films with
Carbon Nanowall
a high quality at low temperatures in MBE.
Fifthly, in 2006, he invented the ultrahigh electron density (~5 x1016cm3) low temperature
atmospheric pressure plasma source of which concept is extremely new and the density is the top
record in the world. He found out that it enabled to get the extremely strong adhesion among materials,
which were applied to automobile industries and furthermore opened a new bio field.
Finally, in 2012, Dr. Hori and his colleagues discovered for the firsttime in the world that the plasma activated medium can kill ovariancancer cells with a very high selectivity to normal cells and named PAM.
He is the inventor of the plasma activated medium (PAM) andplasma activated lactic (PAL), which can selectively kill various
cancer cells, such as ovarian, brain and stomach / pancreatic cancers
and so on. Dr. Hori systematized results towards the establishment ofplasma medical science by publishing a book of Plasma MedicalScience (2018). His papers of 50 regarding the plasma medicine and thenumber of paper citations is 1718 (2020, 3/02) only for 6 years are
Therapeutic effect of PAM administrationon peritoneal mice with gastric cancer
extremely excellent and epoch-making. All of inventions above towards
the plasma process innovations were developed by Prof. Hori’s greatscientific results and supported by his patents of Registered Patent: 171 (Patent Applications: 393).
His great achievements are summarized as follows, Prof. Hori has 546 papers, 3,020 presentations
including 1,802 international conferences with 618 invited talks, 29 books, and 24 awards in his lifetime
achievements. Over 30 years, he has been an outstanding plasma scientist putting his heart into theprogress of low-temperature plasma region from both viewpoints of sciences and industries. It isconsistent in his strong earnest to achieve the establishment of reactive plasma process sciences
including semiconductor, material processes and plasma life fields and his performances on both ofsciences and innovations are evaluated to be extremely excellent with high originality in many fields.
2Press Release
Appendix-1: 2020 AAPPS-DPP Plasma Innovation Prize
AAPPS-DPP Plasma Innovation Prize wasfounded by the AAPPS-DPP in 2019. This prize isgiven to a plasma physicist/engineer annually torecognize outstanding contributions to experimental
and/or theoretical research in all fields of plasma
applications, focusing on impacts on industry. The
2020 Selection Committee composed of leading
physicists of plasma application in Asia-Pacificregion.
Selection committee:
Chairman:Prof. Rajdeep S. Rawat (Nanyang Technological University)
Members:
Prof. Masaharu Shiratani (Kyushu University)
Dr. Masaru Izawa (Hitachi High-Tech Science Corporation)
Prof. Roderick W. Boswell (Australian National University)
Dr. Anthony B Murphy (CSIRO)
Prof. Chao Chang (Xi’an Jiaotong University)
Prof. XinPei Lu (HuaZhong University of Science and Technology)
Prof. M. Krishnamurthy (Tata Institute of Fundamental Research)
Prof. Sudeep Bhattacharjee (India Inst. of Technology)
Prof. Hyyong Suk (Gwangju Institute of Science and Technology)
Prof. Wonho Choe (Korea Advanced Institute of Science and Technology)
Prof. Paul K. Chu (City University of Hong Kong)

thCertificate, medal and cash prize will be given
3 at the 4 Asia-Pacific Conference on Plasma
Physics in Oct.26, 2020.