㜞᷷෻ᔕ⸅ᇦᜂ૕↪䊆䉾䉬䊦ၮ㊄ዻ㑆ൻว‛ෘ⤑䈱ᄙሹ⾰᭴ㅧ೙ᓮ㩷㩷⎇ⓥઍ⴫⠪䋺㩷 ർᶏ㆏ᄢቇᄢቇ㒮Ꮏቇ⎇ⓥ⑼㩷 ಎᢎ᝼㩷 ᄢෳ㆐਽㩷㩷䋱䋮✜⸒㩷㩷 ᭽䇱䈭ⅣႺᛛⴚ䇮଀䈋䈳䇮㽲὇ൻ᳓⚛䈱ᡷ⾰䈮䉋䉎᳓⚛䉧䉴䈱⵾ㅧ䇮㽳䊋䉟䉥䊙䉴╬䈱ಽᢔဳᧂ೑↪὇⚛⾗Ḯ䈱㜞ຠ૏ᶧ૕Άᢱ䈻䈱ォ឵䇮䈅䉎䈇䈲㽴ឃ᳇䉧䉴䈱ᵺൻಣℂ╬䈮䈍䈇䈩䇮⸅ᇦᛛⴚ䈲㊀ⷐ䈭ၮ⋚ᛛⴚ䈫䈭䈦䈩䈇䉎䇯䉁䈢䇮⸅ᇦᛛⴚ䈱㐿⊒䈮䈍䈇䈩䇮Ꮧዋ㊄ዻ䉕ઍᦧ䈜䉎ᣂ䈢䈭⸅ᇦ᧚ᢱ䈱ត⚝䈫䈫䉅䈮䇮⸅ᇦ䉕㜞ല₸䈪ᯏ⢻䈘䈞䉎⸅ᇦᜂ૕䈱㐿⊒䈏ਇนᰳ䈪䈅䉎䇯㩷㩷 ㊄ዻ♽䈱⸅ᇦᜂ૕䈲䇮⠴ᾲᕈ䈫ᯏ᪾⊛ᒝᐲ䉕౗䈰஻䈋䇮⠴ⴣ᠄ᕈ䉇⠴ᾲⴣ᠄ᕈ䈅䉎䈇䈲䊥䉰䉟䉪䊦䈻䈱ኻᔕ䈱㕙䈪䉶䊤䊚䉾䉪䉴䉋䉍ఝ䉏䈩䈇䉎䇯䉁䈢䇮㊄ዻ䈱㜞䈇ᾲવዉ₸䈲ᕆㅦ䈭ടᾲ಄ළ䉇෩ኒ䈭᷷ᐲ೙ᓮ䉕น⢻䈮䈜䉎䇯䈚䈢䈏䈦䈩䇮቟ଔ䈪◲ଢ䈭䊒䊨䉶䉴䈮䉋䈦䈩㊄ዻ⵾⸅ᇦᜂ૕䉕⵾ㅧ䈜䉎䈖䈫䈏䈪䈐䉏䈳䇮ⅣႺᛛⴚ䈱ㅴዷ䈮䉅䈢䉌䈜ነਈ䈲ᄢ䈐䈇䇯㩷㩷 ᧄ⎇ⓥ䈲䇮☳ᧃಃ㊄ᛛⴚ䉕ၮ⋚䈫䈜䉎቟ଔ䈪◲ଢ䈭ᚻᲑ䈮䉋䉍․⇣䈭ᄙሹ⾰᭴ㅧ䉕஻䈋䈢䊆䉾䉬䊦ၮ㊄ዻ㑆ൻว‛ෘ⤑䉕⵾ㅧ䈜䉎䈫䈫䉅䈮䇮䈠䈱ᄙሹ⾰᭴ㅧ䉕೙ᓮ䈜䉎ᣇᴺ䉕ᬌ⸛䈜䉎䈖䈫䉕⋡⊛䈫䈚䈢䇯㩷㩷 ⪺⠪䉌䈲䇮䈖䉏䉁䈪䇮㊄ዻ♽䊙䉟䉪䊨䊥䉝䉪䉺䊷䉇㜞ല₸䊍䊷䊃䉲䊮䉪䈱⵾ㅧ䊒䊨䉶䉴䈱㐿⊒䉕⋡⊛䈫䈚䈩䇮☳ᧃಃ㊄⊛ᚻᴺ䈮䉋䉎䊙䉟䉪䊨䉼䊞䊮䊈䊦䋨ᓸ⚦ᵹ〝䋩ᒻᚑ䊒䊨䉶䉴䉕ᬌ⸛䈚䈩䈐䈢 㪈㪄㪋㪀䇯ᧄ䊒䊨䉶䉴䈮䉋䉏䈳䇮⒳䇱䈱ว㊄䈮䉋䈦䈩ౝᒛ䉍䈘䉏䈢䊙䉟䉪䊨䉼䊞䊮䊈䊦䉕㊄ዻ䈱ౝㇱ䈮⋥ធᒻᚑ䈜䉎䈖䈫䈏䈪䈐䉎䇯㪝㫀㪾㪅㪈 䈮䊙䉟䉪䊨䉼䊞䊮䊈䊦䈱ᒻᚑᯏ᭴䉕ᮨᑼ⊛䈮␜䈜䇯⵾ຠᧄ૕䉕᭴ᚑ䈜䉎ၮ૕㊄ዻ䈱࿶☳૕ਛ䈮䇮Ⲣὐ䈱䉋䉍ૐ䈇೎⒳䈱㊄ዻ䈱⚦✢䉕ၒ䉄ㄟ䉃䇯䈖䈱⚦✢䈲ⓨ㓗ᒻ⁁䉕ਈ䈋䉎‶†䉮䉝䈫䈚䈩ᯏ⢻䈜䉎䇯䈜䈭䉒䈤䇮‶†䉮䉝䈲὾⚿ㆊ⒟䈪ṁⲢ䊶ᵹ಴䈚䈩ⓨ㓗䉕ᒻᚑ䈜䉎䈫䈫䉅䈮䇮๟࿐䈱ၮ૕
㊄ዻ䈫ว㊄ൻ䈚䈩䊤䉟䊆䊮䉫ጀ䉕ᒻᚑ䈜䉎䇯⪺⠪䉌䈲䇮䈖䈱ᚻᴺ䉕⊒ዷ䈘䈞䈩䇮㊄ዻ☳ᧃ䈫᦭ᯏ䊋䉟䊮䉻䊷䈫䈱䉮

Fig. 1

Schematic illustration of the

microchannel formation mechanism.

䊮䊌䉡䊮䊄䉕‶†䉮䉝䈫䈜䉎䈖䈫䈮䉋䉍䇮છᗧ䈱ᢿ㕙ᒻ⁁䈫䊈䉾䊃䊪䊷䉪䊃䊘䊨䉳䊷䉕᦭䈜䉎䊙䉟䉪䊨䉼䊞䊮䊈䊦✂䉕ᒻᚑ䈜䉎⥄↱ᒻ⁁䊙䉟䉪䊨䉼䊞䊮䊈䊦ᒻᚑ䊒䊨䉶䉴䉕㐿⊒䈚䈢 㪉㪃㩷㪊㪀䇯䈠䈱⎇ⓥㆊ⒟䈮䈍䈇䈩䇮ၮ૕㊄ዻ䈫‶†䉮䉝㊄ዻ䈱㧙㧙⚵䉂ว䉒䈞䈫䈚䈩 㪥㫀 䈫 㪘㫃 䉕↪䈇䈢႐ว䈮䇮䊙䉟䉪䊨䉼䊞䊮䊈䊦䈱๟࿐䈮ᄙሹ⾰䈱 㪥㫀㪘㫃 ෘ⤑䈏ᒻᚑ䈜䉎䈖䈫䉕⷗಴䈚䈢䇯䈖䈱ෘ⤑䈪䈲䇮㪝㫀㪾㪅㪉 䈮␜䈜䉋䈉䈮⋥ᓘ 㪈䌾㪈㪇㱘㫄 ⒟ᐲ䈱⚦ሹ䈏⤑ෘᣇะ䈮㐳䈒ᚑ㐳䈚䈩䈇䉎䇯䈖䈱ෘ⤑䈲䇮‶†䉮䉝䈱ᒻ⁁䈮䉋䈦䈩ᐔ᧼╬䈱છᗧ䈱ᒻ⁁䈮೙ᓮ䈜䉎䈖䈫䈏น⢻䈫⠨䈋䉌䉏䉎䇯䉁䈢䇮㪥㫀 䈫 㪘㫃 䈱㊂Ყ䈮䉋䈦䈩⵾ຠో૕䉕ᄙሹ⾰㊄ዻ㑆ൻว‛ෘ⤑䈮䉋䉍᭴ᚑ䈜䉎䈖䈫䉅ේℂ⊛䈮䈲น⢻䈪䈅䉎䇯䈘䉌䈮䇮㊄ዻ㑆ൻว‛ 㪥㫀㪘㫃 䈲⠴ᾲᕈ䇮⠴㘩ᕈ䇮⠴㉄ൻᕈ䈮ఝ䉏䈩䈍䉍䇮⸅ᇦᜂ૕᧚ᢱ䈫䈚䈩ㆡ䈚䈩䈇䉎䇯㩷

Fig. 2Formation of the porous thick film of NiAl intermetallic compound.

㩷㩷 䉁䈢䇮ᦨㄭ䇮ห䈛䈒 㪥㫀㪄㪘㫃 ♽䈱㊄ዻ㑆ൻว‛䈪䈅䉎 㪥㫀㪊㪘㫃 䈮㉄䋭䉝䊦䉦䊥ಣℂ䉕ᣉ䈜䈖䈫䈮䉋䈦䈩䊜䉺䊮䈱᳓⫳᳇ᡷ⾰䈮ኻ䈜䉎⸅ᇦᯏ⢻䈏↢䈛䉎੐䈏ႎ๔䈘䉏䈢 㪌㪀䇯⸅ᇦᯏ⢻䈲 㪥㫀㪊㪘㫃 ⴫㕙䈎䉌䈱 㪘㫃 ᚑಽ䈱ㆬᛯ⊛ṁ಴䈮䉋䉍↢ᚑ䈚䈢䊅䊉 㪥㫀 ⋧䈮䉋䉎䈫⠨䈋䉌䉏䈩䈍䉍䇮㪥㫀㪘㫃 䈪䉅ห᭽䈱⚿ᨐ䈏ᓧ䉌䉏䉎น⢻ᕈ䈏䈅䉎䇯䈠䈱ᓟ䇮䈘䉌䈮䇮▗⁁䈱 㪥㫀㪊㪘㫃 䉕↪䈇䈢䊜䉺䊉䊷䊦ಽ⸃෻ᔕታ㛎䈮䉋䉍䇮ήಣℂ䈱 㪥㫀㪊㪘㫃 䈪䉅⸅ᇦᯏ⢻䉕␜䈜䈖䈫䈏ႎ๔䈘䉏䈢 㪍㪀䇯㩷㩷 䈜䈭䉒䈤䇮਄⸥䈱䉋䈉䈮◲ଢ䈭ಣℂ䈮䉋䈦䈩ᄙሹ⾰ෘ⤑ౝ䈱⚦ሹ䈱⴫㕙䈮⸅ᇦᵴᕈ䉕ઃਈ䈜䉎䈖䈫䈏䈪䈐䉏䈳䇮ᭂ䉄䈩ૐ䈇䉮䉴䊃䈪㜞᷷⸅ᇦ෻ᔕ↪䈱䊙䉟䉪䊨䊥䉝䉪䉺䊷䈏⵾ㅧ䈪䈐䉎䈖䈫䈮䈭䉎䇯ᧄ⎇ⓥ䈪䈲䇮䈖䈱䉋䈉䈭ⷰὐ䈎䉌䈱⎇ⓥ䈱╙৻ᱠ䈫䈚䈩䇮ਥ䈫䈚䈩 㪥㫀㪄㪘㫃 ♽ᄙሹ⾰㊄ዻ㑆ൻว‛ෘ⤑䈱䊙䉪䊨ᒻ⁁೙ᓮ䇮䈍䉋䈶ෘ⤑ౝ⚦ሹ᭴ㅧ೙ᓮ䈱䈢䉄䈱䊒䊨䉶䉴ᄌᢙ䈱ᦨㆡൻ䈮ᵈ⋡䈚䈩ᬌ⸛䉕ⴕ䈦䈢䇯㩷㩷䋲䋮ታ㛎ᣇᴺ㩷㪉㪅㪉㩷 ࿶☳૕䈱૞⵾㩷㧙㧙㩷 ᐔဋ☸ᓘ 㪌㱘㫄 䈱 㪥㫀 ☳ᧃ䉕૶↪䈚䇮㐳䈘 㪈㪌㫄㫄 䈱 㪘㫃 ✢䉁䈢䈲 㪌㫄㫄㫏㪌㫄㫄 䈱 㪘㫃 ᧼䉕ౝ൮䈜䉎࿶☳૕䉕૞⵾䈚䈢䇯㪥㫀 ☳ᧃ䈱⾰㊂䈲 㪈㪊㪾䇮࿶☳૕䈱ᒻ⁁䈲⋥ᓘ 㪉㪇㫄㫄䇮㜞䈘⚂ 㪌㫄㫄 䈱౞ᩇ⁁䈪䈅䉎䇯૶↪䈚䈢 㪘㫃 ✢䈱⋥ᓘ䈲 㪉㪇㪇㱘㫄 䈍䉋䈶 㪌㪇㪇㱘㫄 䈱ੑ⒳㘃䇮䉁䈢䇮㪘㫃 ᧼䈱ෘ䈘䈲 㪈㪇㪇䇮㪉㪇㪇䇮㪌㪇㪇㱘㫄 䈱ਃ⒳㘃䈪䈅䉎䇯࿶☳૕䈱ᚑᒻ䈲䇮ቶ᷷䊶ᄢ᳇ਛ㔓࿐᳇ਅ䈪䇮࿶ജ 㪊㪇㪇䌾㪎㪍㪇㪤㪧㪸 䈱৻ゲ࿶❗䈮䉋䉍ⴕ䈦䈢䇯㩷㩷㪉㪅㪉㩷 ᾲಣℂ㩷㩷 ࿶☳૕䈱ᾲಣℂ᧦ઙ䈲એਅ䈱䈫䈍䉍䈪䈅䉎䇯⹜ᢱ䈱ᦨ㜞ടᾲ᷷ᐲ䈲䇮㪥㫀 䈱☳ᧃಃ㊄䈪↪䈇䉌䉏䉎ᾲಣℂ᷷ᐲ䉕ෳ⠨䈮䈚䈩 㪈㪋㪎㪊㪢 䈫䈚䈢䇯᣹᷷ㅦᐲ 㪇㪅㪉㪢㪆㫊 䈪⹜ᢱ䉕ቶ᷷䈎䉌 㪈㪋㪎㪊㪢 䉁䈪ടᾲ䈚䈢ᓟ䇮Ἱ಄䈚䈢䇯㪝㫀㪾㪅㪊 䈮㪘㫃㪄㪥㫀 ੑర♽ᐔⴧ⁁ᘒ࿑䉕␜䈜䇯㪈㪋㪎㪊㪢 䈮䈍䈔䉎ᐔⴧ⋧䈲䇮㪘㫃 Ớᐲ䈱㜞䈇㗅䈮䇮ᶧ⋧䇮㪥㫀㪘㫃䇮㪥㫀㪊㪘㫃 䈍䉋䈶 㪥㫀 ࿕ṁ૕䈫䈭䉎䇯䉁䈢䇮㪈㪇㪎㪊㪢䇮㪈㪉㪎㪊㪢䇮㪈㪋㪎㪊㪢 䈪䈲ᶧ⋧䈫ᐔⴧ䈜䉎࿕⋧䈏⇣䈭䉎䈖䈫䈏ᵈ⋡䈘䉏䉎䇯㩷㩷 䈭䈍䇮਄⸥䈱ടᾲ䋭Ἱ಄ታ㛎䈱ઁ䈮䇮᣹᷷ㆊ⒟䈱ᚲቯ䈱᷷ᐲ䈪⹜ᢱ䉕ᕆ಄䈚䈩⚵❱䉕ಓ⚿䈜䉎ታ㛎䉅ⴕ䈦䈢䇯䈜䈼䈩䈱ታ㛎䈮䈍䈇䈩ᾲಣℂᤨ䈱㔓

Fig. 3

Al-Ni binary alloy phase diagram.

࿐᳇䈲䉝䊦䉯䊮䉧䉴䈫䈚䈢䇯㩷㩷䋳䋮⚿ᨐ㩷㪊㪅㪈㩷 䊙䉟䉪䊨䉼䊞䊮䊈䊦๟ㄝ䈮䈍䈔䉎⚵❱ᒻᚑ㩷 㩷㩷 ᧄ⎇ⓥ䈱ታ㛎᧦ઙਅ䈪䈲䇮⚦✢⁁䈱‶†䉮䉝䉕↪䈇䈢䈜䈼䈩䈱⹜ᢱ䈮䈍䈇䈩䊙䉟䉪䊨䉼䊞䊮䊈䊦䈏ᒻᚑ䈚䈢䇯䉁䈝䇮㱢㪌㪇㪇㱘㫄 䈱‶†䉮䉝✢䉕↪䈇䈢႐ว䈮䈧䈇䈩ㅀ䈼䉎䇯㪝㫀㪾㪅㪋 䈲࿶☳૕Ბ㓏䈪䈱᳇ሹ₸䈱⇣䈭䉎ਃ⒳㘃䈱⹜ᢱ䈪ᒻᚑ䈚䈢䊙䉟䉪䊨䉼䊞䊮䊈䊦䈱๟ㄝ⚵❱䈱଀䉕␜䈚䈩䈇䉎䇯䈖䉏䉌ਃ䈧䈱⹜ᢱ䈲䇮㪝㫀㪾㪅㪋㩿㪸㪀䇮㩿㪹㪀䇮㩿㪺㪀䈱㗅䈮࿶☳૕᳇ሹ₸䈏㜞䈒䈭䈦䈩䈇䉎䇯㪝㫀㪾㪅㪋 䈮䉋䉎䈫䇮䊙䉟䉪䊨䉼䊞䊮䊈䊦๟ㄝ䈱 㪥㫀㪄㪘㫃 ෻ᔕ↢ᚑ‛㗔ၞ䈲䇮࿶☳૕᳇ሹ₸䈮䉋䈦䈩㗼⪺䈭ᓇ㗀䉕ฃ䈔䉎䈖䈫䈏䉒䈎䉎䇯㊄ዻ☳ᧃ䈱⒳㘃䈏᳿䉁䉏䈳䇮࿶☳૕᳇ሹ₸䈲ᚑᒻ࿶ജ䈮ଐሽ䈚䈩ᄌൻ䈜䉎䇯㪝㫀㪾㪅㪋㩿㪸㪀䈱⹜ᢱ䈲ᧄታ㛎▸࿐䈪ᦨ䉅ૐ䈇 㪊㪇㪇㪤㪧㪸 䈱࿶ജ䈮䉋䉍ᚑᒻ䈘䉏䈢䉅䈱䈪䈅䉎䇯䈖䉏એᄖ䈱⹜ᢱ䈪䈲 㪝㫀㪾㪅㪋㩿㪹㪀䈍䉋䈶㩿㪺㪀䈮⷗䉌䉏䉎䉋䈉䈮ဋ৻䈭ෘ䈘䉕ᜬ䈧ᄙሹ⾰ෘ⤑䈏ᒻᚑ䈚䈢䈏䇮㧙㧙㪝㫀㪾㪅㪋㩿㪸㪀䈱⹜ᢱ䈮䈍䈇䈩䈲䇮㪘㫃 Ⲣᶧ䈏ਇဋ৻䈮ᶐㅘ䈚䈢ᒻ〔䈏⷗䉌䉏䉎䇯䈖䈱⥄↱෻ᔕᶐㅘ㗔ၞ䈪䈲䇮㪥㫀㪄㪘㫃 ♽䈱ᄙሹ⾰ෘ⤑䈮․᦭䈱ᢛ೉䈚䈢⚦ሹ䈏ⷰኤ䈘䉏䈭䈇䇯䈖䈱⚿ᨐ䈲䇮ᄙሹ⾰ෘ⤑䈱ᒻᚑᯏ᭴䉕⸃᣿䈜䉎਄䈪㊀ⷐ䈭䊍䊮䊃䈮䈭䉍ᓧ䉎䈫⠨䈋䉌䉏䉎䇯㩷

Fig. 4Back-scattered electron images of the structures near the microchannels (d=500Ǵm). Porosity of the green compact: (a) 36.0%, (b) 29.8%, (c) 23.6%.

㩷㪊㪅㪉㩷 ᄙሹ⾰ෘ⤑䈱⚵❱㩷㩷 㪝㫀㪾㪅㪌 䈮ᄙሹ⾰ෘ⤑䈱ౖဳ⊛䈭⚵❱㩿㪸㪀䈫䇮ෘ⤑䉕ෘ䈘ᣇะ䈮ᮮᢿ䈚䈩᷹ቯ䈚䈢 㪘㫃 ỚᐲಽᏓ㩿㪹㪀䉕␜䈜䇯෻኿㔚ሶ✢௝䈪䈅䉎 㪝㫀㪾㪅㪌㩿㪸㪀䈱᣿ᐲ䈱䉮䊮䊃䊤䉴䊃䈎䉌䇮ᄙሹ⾰ෘ⤑䈏ੑ䈧䈱ጀ䈎䉌䈭䉎หᔃ౞⊛䈭᭴ㅧ䉕ᜬ䈧䈖䈫䈏䉒䈎䉎䇯ᦨౝ๟䈱ጀ䈱ᐔဋ 㪘㫃 Ớᐲ䈲 㪌㪊㪅㪌㫄㫆㫃㩼 䈪 䈅 䉍 䇮 ╙ ੑ 䈱 ጀ 䈲㪋㪇㪅㪌㫄㫆㫃㩼䈪䈅䉎䇯䈖䈱䉋䈉䈭㜞 㪘㫃 Ớᐲ㪥㫀㪘㫃 ⋧䋨㪥㫀㪘㫃㪘㫃㪀䈫ૐ 㪘㫃 Ớᐲ 㪥㫀㪘㫃 ⋧䋨㪥㫀㪘㫃㪥㫀㪀䈻䈱ᡆૃ⊛䈭⋧ಽ㔌䈲 㪥㫀㪄㪘㫃♽䈱᜛ᢔኻታ㛎䈪䈚䈳䈚䈳ⷰኤ䈘䉏䉎䇯䈖䈱⃻⽎䈲䇮㪥㫀㪘㫃 ⋧䈮䈍䈔䉎᜛ᢔଥᢙ䈱․⇣䈭Ớᐲଐሽᕈ䈮⿠࿃䈜䉎 㪎㪀䇯㩷㩷 䉁䈢䇮䉅䈉৻䈧ᵈ⋡䈘䉏䉎ὐ䈲䇮㪥㫀㪘㫃㪥㫀 ጀ䉋䉍 㪥㫀㪘㫃㪘㫃 ጀ䈱ᣇ䈏ᄙ䈒䈱⚦ሹ䉕฽䉖䈪䈇䉎䈖䈫䈪䈅䉎䇯㪝㫀㪾㪅㪍 䈲㪥㫀㪘㫃 ෘ⤑䈮䈍䈔䉎⚦ሹ䈱૕Ⓧ₸䈱ෘ

Fig. 5Structure of the porous thick film (a)䈘ᣇะಽᏓ䉕␜䈚䈩䈇䉎䇯⚦ሹ૕Ⓧand aluminum-concentration profile (b).

㧙㧙₸䈲෻኿㔚ሶ✢௝䈎䉌↹௝⸃ᨆ䈮䉋䈦䈩᳞䉄䈢䇯㪝㫀㪾㪅㪍 䈮⷗䉌䉏䉎䉋䈉䈮䇮⚦ሹ૕Ⓧ₸䈲䊙䉟䉪䊨䉼䊞䊮䊈䊦䊤䉟䊆䊮䉫ౝოㄭற䈪ᦨ䉅㜞䈒䇮㪥㫀 䊋䊦䉪஥䈾䈬ૐ䈒䈭䉎௑ᢳ⊛䈭ಽᏓ䉕␜䈜䇯䈖䈱䉋䈉䈭ಽᏓ䈲⸅ᇦᜂ૕䈮ᅢㆡ䈪䈅䉎䇯㱢㪌㪇㪇㱘㫄 䈱‶†䉮䉝✢䉕↪䈇䈢䈜䈼䈩䈱⹜ᢱ䈪ห᭽䈱⚵❱⊛․ᓽ䈏⏕⹺䈘䉏䈢䇯㩷㩷 㪝㫀㪾㪅㪎 䈲䇮㱢㪌㪇㪇㱘㫄 䈱‶†䉮䉝✢䉕↪䈇䈢႐ว䈮䈍䈔䉎䇮࿶☳૕Ბ㓏䈱᳇ሹ₸䈫ෘ⤑䈱⚦ሹ૕Ⓧ₸䈱㑐ଥ䉕

Fig. 6

Voidage distribution in the porous␜䈚䈩䈇䉎䇯ෘ⤑ో૕䈱ᐔဋ⚦ሹ૕thick film in the specimen shown in Fig.5.

Ⓧ₸䈲䇮࿶☳૕᳇ሹ₸䈏 㪉㪐㪅㪏㩼䈱ᤨ䈮 ᦨ 㜞 ୯ 䋨 㪋㪍㪅㪇㩼 䋩 䈮 ㆐ 䈜 䉎 䇯 䉁 䈢 䇮㪥㫀㪘㫃㪘㫃 ጀ䉅ห䈛࿶☳૕᳇ሹ₸䈱႐ว䈮 㪌㪊㪅㪏㩼䈱ᦨ㜞୯䉕␜䈚䈩䈇䉎䇯㩷㩷㪊㪅㪊㩷 ‶†䉮䉝✢䈱⋥ᓘ䈱ᓇ㗀㩷㩷 ᰴ䈮䇮㱢㪉㪇㪇㱘㫄 䈱‶†䉮䉝✢䉕↪
䈇䈢ታ㛎䈱⚿ᨐ䉕㱢㪌㪇㪇㱘㫄 䈱⚿ᨐ䈫ኻᲧ䈘䈞䈧䈧ᬌ⸛䈜䉎䇯㩷㪝㫀㪾㪅㪏㩿㪸㪀䌾㩿㪺㪀䈲䇮䈠䉏䈡䉏 㪝㫀㪾㪅㪋㩿㪸㪀䌾㩿㪺㪀䈫ห䈛࿶☳૕᳇ሹ₸䈱႐ว䈱⚵❱䉕␜䈚䈩䈇䉎䇯✢ᓘ䈱Ꮕ⇣䈮⿠࿃䈜䉎ᵈ⋡䈜䈼䈐⋧⇣䈲ੑὐ䈅䈦䈢䇯䉁䈝ෘ⤑䈱⋧᭴ᚑ䈮㑐䈚䈩䈲䇮㱢㪉㪇㪇㱘㫄 䈱‶†䉮䉝✢䉕↪䈇䈢䈜䈼䈩䈱

Fig. 7

Relationship between the porosity of

the green compact and the voidage of thethick film when d =500Ǵm.

⹜ᢱ䈮䈍䈇䈩䇮ෘ⤑䈲 㪥㫀㪘㫃㪥㫀 ৻ጀ䈱䉂䈎䉌ᚑ䈦䈩䈇䈢䇯䈖䉏䈲䇮‶†䉮䉝✢ᓘ䈏ዊ䈘䈇䈢䉄䈮Ყ⴫㕙Ⓧ䈏ᄢ䈐䈒䈭䉍䇮ෘ⤑䈎䉌 㪥㫀 䊋䊦䉪஥䈻䈱 㪘㫃 䈱᜛ᢔ䈏ㅦ䉇䈎䈮ㅴⴕ䈚䈢䈢䉄䈫⠨䈋䉌䉏䉎䇯㩷䉅䈉৻䈧䈱⋧⇣ὐ䈫䈚䈩䇮㪝㫀㪾㪅㪏㩿㪸㪀䈮⷗䉌䉏䉎䉋䈉䈮䇮㱢㪌㪇㪇㱘㫄 䈱᧦ઙ䈪䈲⥄↱෻ᔕᶐㅘ㗔ၞ䈱䉂䈏⷗䉌䉏䈢࿶☳૕᳇ሹ₸䈪䉅䇮✢ᓘ䉕㱢㪉㪇㪇㱘㫄 䈫䈜䉎䈖䈫䈮䉋䈦䈩ဋ৻䈭ෘ䉂䉕ᜬ䈧ᄙሹ⾰ෘ⤑䈏⵾ㅧ䈪䈐䉎䈖䈫䈏᜼䈕䉌䉏䉎䇯䈖䈱ේ࿃䈫䈚䈩䈲䇮✢ᓘ䈏ዊ䈘䈇႐ว䈱ᣇ䈏䇮䊙䉟䉪䊨䉼㧙㧙

Fig. 8Structures near the microchannels (d =200Ǵm). Porosity of the green compact:(a) 36.0%, (b) 29.8%, (c) 23.6%.

䊞䊮䊈䊦䈱⋥ᓘ䈫Ყセ䈚䈢䈫䈐䈱ෘ⤑䈱⋧ኻෘ䈘䈏ᄢ䈐䈇䈢䉄䈮䇮䉋䉍ᒝᐲ⊛䈮቟ቯ䈪䈅䈦䈢䈖䈫䈏⠨䈋䉌䉏䉎䇯㩷㩷 㪝㫀㪾㪅㪐 䈮㱢㪉㪇㪇㱘㫄 ✢䉕↪䈇䈢႐ว䈱࿶☳૕᳇ሹ₸䈫ෘ⤑䈱⚦ሹ૕Ⓧ₸䈱㑐ଥ䉕␜䈜䇯ෘ⤑䈱ᐔဋ⚦ሹ૕Ⓧ₸䈲䇮࿶☳૕᳇ሹ₸䈏 㪉㪐㪅㪏㩼䈱ᤨ䈮ᦨ㜞୯ 㪍㪇㪅㪉㩼䈮㆐䈜䉎䇯䈖䈱௑ะ䈲㱢㪌㪇㪇㱘㫄 ✢䈱႐ว䈫ห᭽䈪䈅䉎䇯㩷㩷㪊㪅㪋㩷 ᧼⁁‶†䉮䉝䈎䉌ᒻᚑ䈜䉎⚵❱㩷㩷 㪝㫀㪾㪅㪈㪇㩿㪸㪀䌾㩿㪺㪀䈮䈠䉏䈡䉏ෘ䈘 㪈㪇㪇㱘㫄䇮㪉㪇㪇㱘㫄 䈍䉋䈶 㪌㪇㪇㱘㫄 䈱᧼⁁‶†䉮䉝䉕૶↪䈚䈢ታ㛎䈱⚿ᨐ䉕␜

Fig. 9Relationship between the porosityof the green compact and the voidage of the
thick film when d =200Ǵm.

Fig. 10 Structure evolution in the specimens produced with sacrificial-core plates.
Thickness of the plate: (a) 100Ǵm, (b) 200Ǵm, (c) 500Ǵm.

㧙㧙䈜䇯ᧄ⎇ⓥ䈱ታ㛎᧦ઙ䈱▸࿐䈪䈲䇮䊙䉟䉪䊨䉼䊞䊮䊈䊦䈮⋧ᒰ䈜䉎ⓨ㓗䈏ᒻᚑ䈚䈢䈱䈲ෘ䈘 㪈㪇㪇㱘㫄 䈱႐ว䈱䉂䈪䈅䈦䈢䇯ෘ䈘 㪉㪇㪇㱘㫄 䈍䉋䈶 㪌㪇㪇㱘㫄 䈱႐ว䈲䇮㪘㫃 Ⲣᶧ䈱䊋䊦䉪஥䈻䈱⒖േ䈏㑆䈮ว䉒䈝䇮ᣥ‶†䉮䉝㗔ၞ䈮஗⇐䈚䈢䉁䉁㐽Ⴇ䈚䈢䈫ᕁ䉒䉏䉎⚵❱䈏⷗䉌䉏䈢䇯㩷㩷 ৻ᣇ䇮⚦ሹ᭴ㅧ䈲䈇䈝䉏䈱⹜ᢱ䈮䈍䈇䈩䉅ⷰኤ䈘䉏䈢䇯․䈮‶†䉮䉝┵ㇱ䈮䈍䈇䈩⚦ሹ䈏ᄙ䈒ᒻᚑ䈜䉎௑ะ䈏⷗䉌䉏䈢䇯䈢䈣䈚䇮⚦ሹ䈏䈾䈫䉖䈬⊒㆐䈚䈭䈇㗔ၞ䉅৻ㇱሽ࿷䈚䈢䇯⇣ᒻ‶†䉮䉝䉕↪䈇䈢႐ว䈱⚦ሹ᭴ㅧᒻᚑ䈱ᦨㆡ᧦ઙ䈱ᛠី䈲੹ᓟ䈱⺖㗴䈪䈅䉎䈏䇮න䈭䉎⹜ⴕ㍲⺋䈮㗬䉌䈭䈇䈢䉄䈮䈲䇮⚦ሹᒻᚑ䈱䊜䉦䊆䉵䊛䉕⸃᣿䈜䉎ᔅⷐ䈏䈅䉎䇯䈖䈱໧㗴䈮䈧䈇䈩䈲ᒁ䈐⛯䈐ᬌ⸛䉕ⴕ䈇䈢䈇䇯㩷㩷䋴䋮⚿⸒㩷㩿㪈㪀㩷 ‶†䉮䉝✢䈱⋥ᓘ䈏 㪌㪇㪇㱘㫄䇮࿶☳૕᳇ሹ₸䈏 㪉㪊㪅㪍䌾㪊㪈㪅㪌㩼䈱႐ว䇮⚦ሹ᭴ㅧ䉕᦭䈜䉎㪥㫀㪘㫃 ㊄ዻ㑆ൻว‛ෘ⤑䈏䊙䉟䉪䊨䉼䊞䊮䊈䊦䈱๟䉍䈮ᒻᚑ䈚䈢䇯㩷㩿㪉㪀㩷 ‶†䉮䉝✢䈱⋥ᓘ䈏 㪌㪇㪇㱘㫄䇮࿶☳૕᳇ሹ₸䈏 㪊㪍㪅㪇㩼䈱႐ว䇮㪘㫃 Ⲣᶧ䈏ਇⷙೣ䈮ᶐㅘ䈚䈩᜛䈏䈦䈢⥄↱෻ᔕᶐㅘ㗔ၞ䈏ᒻᚑ䈚䈢䇯䈖䈱㗔ၞ䈮䈲⚦ሹ䈲ᒻᚑ䈚䈭䈎䈦䈢䇯㩷㩿㪊㪀㩷 ‶†䉮䉝✢䈱⋥ᓘ䈏 㪉㪇㪇㱘㫄 䈱႐ว䈲䇮ో䈩䈱⹜ᢱ䈪ᄙሹ⾰ෘ⤑䈏ᒻᚑ䈚䈢䇯㩷㩿㪋㪀㩷 㱢㪌㪇㪇㱘㫄 䈱‶†䉮䉝✢䉕↪䈇䈢႐ว䇮ෘ⤑䈲㜞 㪘㫃 Ớᐲ 㪥㫀㪘㫃 ⋧䈱ጀ䈫ૐ 㪘㫃 Ớᐲ 㪥㫀㪘㫃⋧䈱ጀ䈫䈱ੑጀ䈎䉌ᚑ䉎䇯䈖䈱႐ว䇮೨⠪䈱ᣇ䈏⚦ሹ䈱૕Ⓧ₸䈏㜞䈇䇯䉁䈢䇮㱢㪉㪇㪇㱘㫄 䈱‶†䉮䉝✢䉕↪䈇䈢႐ว䈲䇮ෘ⤑䈲ૐ 㪘㫃 Ớᐲ 㪥㫀㪘㫃 ⋧৻ጀ䈫䈭䈦䈢䈏⚦ሹ䈱૕Ⓧ₸䈲㜞䈎䈦䈢䇯㩷㩷 㩿㪌㪀㩷 䈇䈝䉏䈱‶†䉮䉝✢ᓘ䈱႐ว䉅䇮࿶☳૕᳇ሹ₸䈏 㪉㪐㪅㪏㩼䈱䈫䈐䈮䇮ෘ⤑䈱⚦ሹ૕Ⓧ₸䈏ᦨᄢ䈫䈭䈦䈢䇯㩷㩷 㩿㪍㪀㩷 ᧼⁁‶†䉮䉝䉕↪䈇䈢႐ว䇮ෘ䈘䈏 㪈㪇㪇㱘㫄 䈱႐ว䈱䉂䈮ቢో䈭ⓨ㓗䈏ᒻᚑ䈚䈢䇯ෘ䈘㪉㪇㪇㱘㫄 䈍䉋䈶 㪌㪇㪇㱘㫄 䈱႐ว䈲䇮㪘㫃 Ⲣᶧ䈱䊋䊦䉪஥䈻䈱⒖േ䈏㑆䈮ว䉒䈝㐽Ⴇ䈚䈢㗔ၞ䈏⷗䉌䉏䈢䇯৻ᣇ䇮⚦ሹ᭴ㅧ䈲䈇䈝䉏䈱⹜ᢱ䈮䉅ᒻᚑ䈚䈢䇯㩷㩷⻢ㄉ㩷ᧄ⎇ⓥ䈲䇮㪉㪇㪇㪍 ᐕᐲ䌊䌆䌅䋲䋱਎♿⽷࿅䈱⎇ⓥഥᚑ䈮䉋䉎េഥ䈱䉅䈫䈪ⴕ䉒䉏䈢䉅䈱䈪䈅䉎䈖䈫䉕⸥䈚䈩䇮䈖䈖䈮⻢ᗧ䉕⴫䈚䉁䈜䇯㩷㩷ෳ⠨ᢥ₂㩷1) T. Ohmi, K. Matsuura, M. Kudoh: International Journal of Self-Propagating
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