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X üðtJ[Å·é±ÆÍïµ¢Bà¿ëñCWõfqÆµÄ@\·éí¯ÅéB³çÉåÈ_Íí´í´ 2 ñÌ½Ëð³¹Ä¢é_ÅWõ¾¯Å«êÎ¢¢ÌÅÍ¸ÅéBÀÛÌÆ±ëêÎCÈ~~[¾¯Å¢¢éiÈ~~[àÜ½æêÅ_©ço½õÍÇÌæ¤ÈõHð½ÇÁ½ÆµÄàõH·êèÅ©Âê_ÉW

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éªCá¦ÎClXÈéBÈ~~[ÌÝÌêCõHÉæÁúËõ Jan. 2014 Vol.27 No.1  39(C) 2014 The Japanese Society for Synchrotron Radiation ResearchFig. 1(Color online) Schematics of (a) Wolter mirror, (c) Kirkpatrick­Baez mirror and (d) advanced Kirkpatrick­Baez mirror. (b) Geometric characteristics of an ellipse, a hyperbola and a Wolter mirror.

Ä~[ãÌ½ËÊuªÏ»ËÅ_£ªÏ»Ë{¦ªÏ»ÆÈèCõ²ãÌ 1 _ð¢ÄÍ¾ÄÈð`¬Å«È¢B2 ñ½ËðÂ Wolter ~[ÅÍC±Ì{½_ð°éÈçC~[ÌÁÆACgªÏGÉÈé_ÅéB~[ÌÁÉæÁÄJ­úÔÌ·ú»â½Ë¦ÌáºªO³êéªC~[ì»v¦ÌÏ»ª 2 ñÌ½ËðoÄLZ³êé½ßCZXª·ÅÉm§³êÄ¨èC©ÂCÝvæÅ½Ë¦á{¦ªêèÆÈèìÌL¢ªs¦éí¯ÅºðÙÆñÇ³Å«éàÌªÀ»Å«é½ßC»êÙÇéB±Ìæ¤É Wolter ~[ÍzIÈfqiFû·ÉRâèÉÈçÈ¢BêûÅCACgÌâèÍCõú}û·ªÈ­Cå«ÈJûðÀ»Å«éjÅÔÌ·ú»â·ÔÀè«ÖÌOª·®Év¢©ÔûÅ»ÌLø½ËÌæÍó`óÌàÇÅ»Ì`óÍñÊÅéªCêÁÄCÜ½CéBe³êé`óë·Íñ 1 nmªC»à»à»ÀIÈeACgë·ÅÈ¯êÎCÀÛÉg¤Æ¢¤Ï_ÅÍÀ»sÂ\ÅÆåÏµµ¢BÁÉd X üÌæÅÍC»Ì¼aÍ mm«ÈÄÅöxÆCàÇð¸xÉÁHÉvª·éÉÍ··¬éB»©çÙÆñÇJ­³êÄ±È©Á½jBÌì»Í»ÝÌ´¸§ÁHÉvªÌZpðàÁÄµÄàì»¢ïÅéÆ¾íêÄ¢éBêûÅCKB ~[ÍC2éi»êªä¦É{õwnÍñÄ³êÄMÒçÌ¤ÍC±Ì Advanced KB ~[õwnðgÁÄC50 nm ÈºÌóÔªð\ðÂFû·ÌÈ¢^ÌÈ~~[ÌÝÅ\¬³êÄ¢éiFig. 1(cjjB~[°÷ ¾ðÀØ ·éàÌÅ©ÌÍÙÆñÇ½RÈ`óÅ2008N©çnß½õwnÌÝvÆV~é½ßC»ÝÌÁHZpðàÁÄ·êÎ 1 nm Ì¸xÅì»Â\Åãqµ½æ¤É 1 ³Éé6) Bµ©µCÚ·éÆÈ~~[ÌPÆ½ËÅ é½ßR}û·ª­¶µCWõprÉµ©g¦È¢B±Ìæ¤É Wolter ~[Æ KB ~[Í·ÉZðé½ßCÅàåçÅéB{¤ ÌX^[g ÍC[^ÌJ­©

Á½BÁÉC{õwnÍ 4 Ì~[Å\¬³êÄ¢é½ßCe³êéACgë·ÉÂ¢Ä¤æèSzªå«©Á½B»Ì½ßC¤ÍCV~[^ÌJ­C~[Ìì»CACgVXeÌJ­CÂ±Æªí©éB±êç·ð¤Ü­pµ½~[Vk¬eXgCgåeXgÆiKð¥ÝÈªçiß

XeªåãåwÌÊçÉæÁÄñÄ³ê½7)B±ÌVçê½BXeÍ Advanced Kirkpatrick­Baez ~[ÆÄÎêÄ¢éBFig. 1(d)É¦·æ¤ÉC»ê¼êÈ~~[ÆoÈ~[ÌÎÅ\¬³êÄ¢éB1 ³Ål¦½êC±êÍ
Wolter ~[Æ¯¶VXeÅé½ßCL¢ìªmÛÅ«éBcûüÆ¡ûüÌð¼ð·é~[VXe2. õwnÝvÆV~[^ÌJ­õ wnÝ vÌ O ñÆµ ÄC ¤ r[  C Åé

BL29XUL Ì 2 ÂÌÀ±nb`Ôi»ÝÌæêCæOnbé½ßCä`ÔjÉ·é45 m Ì£ðp·é±ÆÉµ½B50

rIì»µâ·¢`óÌ~[Å\¬Å«éBV½É¶¶

nm ÌóÔªð\ðÀ»µæ¤Æµ½êC­È­ÆàÅÆ§É§ä·é_Í KB ~[Æ¯¶Å40  úËõ Jan. 2014 Vol.27 No.1

gsbNX ¡ S½Ë~[ðp¢½Fû·ÌÈ¢^d X ü°÷¾ÌJ­Table 1

Designed mirror parameters

M1M2M3M4

ShapeEllipse(for vertical imaging)

Ellipse(for horizontal imaging)

Hyperbola(for vertical imaging)

Hyperbola(for horizontal imaging)

aÞ(m)
bÞ(m)

22.79
14.26~10|3

22.75
10.84~10|3

95.67~10|3
0.8634~10|3

58.46~10|30.5437~10|3

Incident glancing angle(mrad)Þ
Þ

2.8

2.8

4.6

5.0

Distance from object
(mm)Þ
Þ385

215

115

65

Distance from image
(m)ÞÞ

45

45.17

45.27

45.32

Mirror length (mm)

200

130

6030

Þellipse: x2/a2{y2/b21; hyperbola: x2/a2|y2/b21ÞÞAt the center of the mirror

Table 2

Summary of tolerance limits to alignment errors
Tolerance limit

Fig. 2(Color online) PSFs calculated at the (a) on­axis and (b)(c) o­axis conditions.

200{Ì{¦ªÙµ¢àÌÅ

éB±ÌêCÊãÅ

Grazing incident angle

100 mrad

Relative angle

13 mradRolling

40 mradYawing`1 mradRelative length (1)2 mm

Relative length (2)300 mm

Focal length

110 mmÍC10 mm ÉµC¬è¬èðÅ«éÌÅÍÈ¢©Æl¦½BÜ½C~[ì»ãÌsÅCÈ¦¼aÌ¬³È~[`óÍì»¸x«»Ì´öÆÈé½ßCá±Ì]Tð½¹ÄÝv¹´éð¦È©Á½B±ÌÊCJû
1.2~10|3C{¦385~210i¡~cjCì®£50 mmC
Åå X üGlM[11.5 keVi~[R[eBOðàÆµ½½ßCL zû[ðêÌÀEÆèß½jÌõwnðÝvµ½B~[p[^ÌÚ×ð Table 1 É¦·B{õwnÉ¨¯éACgë·ð²×é½ßÉCñÜÀEßTÌ«\ð³µ­]¿Å«ég®õwV~ðJ­µ½8)B{V~[^[^Ìî²ªÍàÆàÆCWõpÈ~~[Ìe`óë·ð²×é½ßÉJ­³ê
½àÌÅFig. 3(Color online) Mirror alignments indicated in the table 2.

éBFresnel­Kirchho ñÜÏªÉîÃ¢Ä¨èCg®Ì`ÀðvZ·é±ÆªÅ«éBFig. 2 ÉvZµ2 Í±ÌÊ©ç»fµ½eACgë·iPSF Ì½êáð¦·B_õ¹ðk¬µ½êÉ¾çêéÌ¼lÌåª20÷ÈàÅeÅ«éACgë·­xªziÂÜèC_LªèÖCPSFjð\µÄ¢éBÆè`jð\µÄ¢éBlð©éÆ»êÙÇµµ­È¢¸ia)ÍìSÉ_õ¹ðzuµ½êCibjCic)ÍSxÅ©ç 8i

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WAVEi1 WAVE Í~[ãÉ 1 üúÌTCgóÌ`·Í 2 nmipeak­to­valleyjÜÅe³êéÆ_t¯½B

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gle determinable stitching interferometer (RADSI)11,12)ð
p¢½BÚ×Í_¶ðQlÉµÄÙµ¢BdvÈ_ÍC{`óvª@ðgÁÄ 1 nm Ì¸xÅñ
µC±êðîÉRsÊ`óðvª[^§ä³ê½ EEM uðgÁÄè_IÉÁHðißé_ÅéBEEM ÅÌÁHÍÁHtfomYð~[ÊãÉ¸µÈªçÁHtðfo
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Fig. 4(Color online) (a) Satellite peaks produced by gure errors
on the elliptical mirror and (b) the relationship between thegure error frequency and the absolute position of satellite
peaks. Sine amplitude: 2.5 nm, X­ray energy: 11.5 keV. (c)Relationships between spatial frequency and ratios of the in­tensity of the satellite peaks to the main peak for sine curves
that have amplitudes of 1, 2 and 3 nm. X­ray energy: 11.5
keV.

Fig. 542  úËõ Jan. 2014 Vol.27 No.1

­È­Æà0.2 nm (root mean square) ª¾çêÄ¨èC
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é±ÆÅ0.5 mmC10 mrad Ì¸xÅACgðj^ÅÍ45 m ÅéÌÅC±Ìæ¤ÈO¹¸êªêÎPOÅ«éB±êðèª©èÉACgðÀ{·éÈÀ±zuÅÍÀ±nb`ÔðÂÈ®^ó_NgðÊ¹È±ÆÉµ½B±Ìæ¤ÉÅ«éÆ±ëÍÔª©©ÁÄà¢iPvZÅC16 mrad~45 m720 mm c¡ûüÉ¸¢¢ÌÅItCÅACgµCÀçê½r[^êéjB»±ÅCÍ¶ßÉÈPÉÀ±Å«ék¬À±CÌÅÍKvÅáÀÌ²®iüËpCÅ_£jÌÝ

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éB±ÌêCFig. 7 É¦·æ¤ÈÈPÈZbgAbv¤È`óÉpxvªVXeÍärIÈÕ©ÂáRXgÅÅæ­CÂÜèCÊíÌWõÀ±Æ½çÏíçÈ¢BÀ±\zÅ«é½ßC¡ãoê·éÆvíêé¡GÈ~[õÅÍCã¬XbgÅ`¬³ê½¼zIÈ_õ¹iñ 5mmjðk¬µC¾çê½Ì`Æ¼lð]¿µ½BÊÉÍ_õ¹ðk¬µÄ¾çêéCÂÜèCõwnÌ PSF ª¾çêé½ßCõwnÌs®S³ð¼Ú
IÉ]¿Å«éB±ÌÊÅ¾çêé PSF Ì­xªzðªè·é½ßÉCWõÀ±Åp¢çêéCXL@ðp¢½Bc¡ÊXÌ]¿ÉÈéªC©ÌÍc¡Æ§ÅéÆl¦é±ÆªÅ«éÌÅC¿å¤Çæ¢]¿û@ÅéBÜ¸CìSÌ PSF ðªèµ½BìSÌ{õÍärIÈPÅéBV~[VÊÉæéÆ{õwnÍÊpÈª¶ÝµCìÌ[ÅÍÉ[ÉªcÞiìÌ[ÅÍtH[JXª¸êé½ßjBìÌ[ªÀ±IÉ¾mÉí©é½ßC»Ì¿å¤ÇSðT·±Æ

Fig. 6(Color online) Schematic of developed alignment system.
(a) Schematic of shape and slope proler. (b) 3D diagramof developed mirror manipulator. (c) Photograph of thewhole system.

Fig. 7

Experimental setup to form a demagnied image.

úËõ Jan. 2014 Vol.27 No.1  43

Fig. 8(Color online) Images obtained in the image plane. X­ray energy: 11.5 keV.

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Ràal³öC»w¤ ºF÷miSPring­8 BL29XULjCÎìNçZ^[·É[­´Ó¢½µÜ·BÜ½C{À±ðêÉsÁ½Rà¤ºÌo[Åébüz¡CØìprCØJ¼²CeªqVC¡ä³PÉ´Ó¢½µÜ·B{¤ÍCåÉ JST æ[vªªÍZpÉ@íJ­vOÌ¬ðó¯ÄsíêÜµ½B
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åãåwåw@Hw¤È¸§ÈwÉp¨wêU ³E­mail: matsuyamaprec.eng.osaka­u.ac.jpêåFX ü°÷¾C´¸§ÁHmªðn
2007Nåãåwåw@Hw¤È¸§ÈwêUmÛöC¹CHwmD2007N
åãåwåw@Hw¤È¸§ÈwÉp¨wêU ³D2007N 3 æè»EDDevelopment of achromatic full­eld hard
X­ray microscopy system based on totalreection mirrors
Satoshi MATSUYAMA

Abstract

Department of Precision Science and Technology, Graduate School ofEngineering, Osaka University
2_1 Yamada­oka, Suita, Osaka 565­0871, JapanA full­eld X­ray microscope is an instrument that can produce magnied images of samples
illuminated with X­rays. It enables the observation and analysis of even the internal structure of asample owing to its superior analysis ability and the high penetration power of X­rays. In addition,
it can be used to observe nanostructures with a spatial resolution greater than 100 nm owing to
the very short wavelengths of X­rays. On the other hand, few developments have been made in
the achromatic X­ray microscope. In this research, we describe the development of achromatic
imaging optics, i.e., advanced Kirkpatrick­Baez mirror optics with four total­reection mirrors. Theperformance of the optics was evaluated by using demagnication and magnication imaging sys­
tem setups at BL29XUL of SPring­8. The demagnication imaging test, using which the point­
spread function of the optics was determined, showed that the optics has the potential to image
X­rays with a sub­50 nm resolution. Further, the transmission images of a test pattern with resolu­
tion of `200 nm were obtained in the magnication imaging test.

46  úËõ Jan. 2014 Vol.27 No.1