MAGNETRON POWER SUPPLY

M600DC-PS

M600DC-PS MAGNETRON POWERMAGNETRONSUPPLYPOWER SUPPLY

M600DC-PS POWER
MAGNETRON
POWER SUPPLYMAGNETRON
SUPPLYDESCRIPTIONTECHNICAL DATADESCRIPTION

The M600DC-PS is compact switch-mode DC power supply
designedto drive magnetron sources. All adjustable
The M600DC-PS is compact switch-mode DC power supply
parameters
are todisplayedon the large
TFT display
withdesigned
drive magnetronsources.
All adjustable
touchscreen.
All settings
can be on
manually
adjustedor canparameters
are displayed
the large
TFT displaywithbe stored
and recalled
automaticallyafter unit
switchoron.
touchscreen.
All settings
can be manuallyadjusted
canThe unitbe
alsofeaturesa built inautomaticallytimer and automatic
storedand recalled
after unitstandby
switch on.
also
a built
in timer via
andoneautomatic
standbymode. The
Unitunit
canbefeatures
remotelycontrolledof available
Unit interfaces.
can be remotely controlled via one of available
analogmode.
or digital
analog or digital interfaces.

ƒƒ
ƒƒ

100
240
V, 50-60
Hz 50 V)up -to1200
V (from

Outputcurrent
voltage
OutputupV mA*(from(from50 V) 1 mA)
uptoto1200
1200

Outputpower
current
Outputup
uptoto1200
600 mA*W** (from(from11mA)
W)

Output power

up to 600 W** (from 1 W)

Switch-mode

3 outputs

Switch-mode

3 outputs

Analog inputs/outputs

3 (0 - 10V)/ 3 (0 - 10V)

Digital inputs and outputs

individual programmableTimerdual mode timer 0 s - 99 h 59 min.

Analog inputs/outputs

3 (0 - 10V)/ 3 (0 - 10V)

TimerFEATURES

ƒƒ

100 - 240 V, 50-60 Hz

Supply voltage
voltage
OutputDigital inputs and outputs

FEATURESƒTECHNICAL
DATA
Supplyvoltage

Easy to extend power up to 1200 W/1800 W/2400 W with
ƒ Easy to extend power up to 1200 W/1800 W/2400 W withadditional
modules
additional
modules
Switchfor 3 magnetronsourceswith withshutters
control.
ƒ Switchfor 3 magnetronsources
shutters
control.
Adjustable
limits ofvoltage,current
andandpower
separately
ƒ Adjustable
limitsof voltage,current
power
separately
for eachforoutput
each output
Multiple
I/O - individual
programmableƒ Multiple
I/O - individual
programmableƒ Thickness
and evaporation
measurements(supportThickness
and evaporationrate ratemeasurements(supportfor Thickness
Monitors
for Thickness
Monitors
TM13TM13/14) /14)
(supportfor active
vacuumgauges)
ƒ Vacuum
measurements
Vacuummeasurements(supportfor activevacuumgauges)
ƒ Flow
MassController
Flow Controller
supportMass
support

CTR90, TTR91, TTR211, PTR225,

CTR90, TTR91, TTR211, PTR225,PTR90, ITR90, ITR100, Baratron,PTR90, ITR90, ITR100, Baratron,$1$/2*,10.6$3*
$1$/2*,10.6$3*
MG13/14,PKR251/360/361,
PKR251/360/361,
MG13/14,
PCR280,ATMIONATMION
PCR280,Communication
RS232/485,
EthernetCommunication interface
interface RS232/485,
Ethernet
MODBUS-TCP/RTU
MODBUS-TCP/RTU

Userinterface
interfaceUserļ7)7GLVSOD\ZLWKWRXFKVFUHHQļ7)7GLVSOD\ZLWKWRXFKVFUHHQ
digitaldigitalencoder
encoder+600 W +600 W

2400 W
1800 W2400 W

1200 W
1800 W

1200 W

English, German, PolishInterface languages

English, German, Polish

DimensionsððPP :ð+ð' ððPP:ð+ð' 2U42HP

Weight (approx.)

6 kg

Dimensions

2U 42HP

Weight (approx.)

6 kg*easy to extend with additional modules, up to: 2.4 A/3.6 A/4.8 A** easy
to extend
withadditionalmodules,modules, up
W/1800W/2400*easy
to extend
withadditional
up to:
to:1200
2.4 A/3.6A/4.8A W** easy to extend with additional modules, up to: 1200 W/1800 W/2400 W

SUBSTRATESUBSTRATE

MAG 1MAG 3MAG 2MAG 1

MAG 3MAG 2

Precision and Vacuum Technology
sales@prevac.eu
PREVAC sp. z o.o.
+48 32 459 21 30
Raciborska
Str. 61 Technology
Precisionand Vacuum+48 32 459 20 01
PL44362 Rogów
M600DC-PS

Ar

Ar

INSTRUMENTS WITH ELECTRONICSINSTRUMENTS WITH ELECTRONICSwww.prevac.eu

ELECTRONICS

Communication
Communication
protocolprotocolInterface languages+600 W+600 W +600 W+600 W

dual mode timer 0 s - 99 h 59 min.

Vacuum measurement
Vacuum measurement(optional)(optional)

ELECTRONICS

600 W

600 W

individual programmable