アテナシス（Athenasys Co., Ltd）のご紹介

会社紹介

https://athenasys.co.jp/

設立：2008年 10月 1日
事業内容：ライセンス販売・サポート，コンサルティング
取り扱っている製品とパートナー会社

Bosprom : プラズマシミュレーションで必要となる輸送係数・反応レートの計算ツール（自社製品）
CFD-ACE+ : マルチフィジックスソフトウェア
CFD-TOPO : 形状シミュレーター

* 日本ESI（販売元）のエージェント
QEC : 分子に対する電子衝突断面積の計算ツール
QDB : プラズマシミュレーションで必要となる反応データベース* Quantemol（開発元）の国内代理店
重点分野：
熱放射を含む熱流体解析全般
半導体製造装置のプロセスシミュレーション
主要なお客様：半導体製造装置メーカー，デバイスメーカー
自動車メーカー
担当者はアネルバ（現キヤノンアネルバ）で半導体製造装置の研究開発に長年従事
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マルチフィジックス ソフトウェア

CFD-ACE+ Suite3

Low pressure

Application examples
3D ICP (steady/transient)※ 77 gas phase reactions for SF6

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Application examples (cont.)5

Pulsed CCP

Application examples (cont.) Atmospheric pressure
DC Arc (with Lorentz force)( and higher pressure )Dielectric Barrier Discharge

2-Temperature Model

Magnets

Takehiko Sato, Osamu Furuya, Kei Ikeda and Tatsuyuki
Nakatani
1st International Conference on Plasma Medicine (ICPM-1),
Corpus Christi, Texas, (2007) pp. 48-50
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Application examples (cont.)
真空, 50 (2007) p. 424

 3-D(with filament model) Magnetized Plasma
JIEED Japan Vol.57 No.3 (2014) p.27
(放電学会シンポジウム)

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Application examples for plasma (cont.)
Self-consistent kinetic model coupling theBoltzmann and Poisson equations

Profiling and modeling of dc nitrogen microplasmas
Wilson et al. J. Appl. Phys., 94 (2003) 2845

※ Kinetic solver :Four dimensional Fokker–Planck solver for electron kinetics incollisional gas discharge plasmas
V. Kolobov, R. Arslanbekov / Computer Physics Communications
164 (2004) 195–201
8Application examples for plasma (cont.)
Modeling study on AC atmospheric pressure He plasma jets interacting witha dielectric target
DPS 2019 (by Kobayashi)

9Application examples for plasma (cont.)
PECVD for Silicon Nitride

DPS 2019 (by Ikeda)

10Sheath model (Boundary condition)
Ion energy dependency for thereaction rate and yield can be set
when ICP (w/o CCP option) is chosen.
The sheath is not mesh resolved.
Semi-analytic sheath model is used tocompute the IEADs at wafer.

The bias needs to be specified: Vrf ,Vdc and Frequency.

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Monte Carlo to compute IEADFs
Characterization of an asymmetricparallel plate radio-frequency
discharge using a retarding fieldenergy analyzer
Plasma Sources Sci. Technol. 21 (2012) 015002

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Monte Carlo to compute IEADFs (2)Specify positions to compute IEADF
Electron Density

Conditions:
Ar 10 mTorr
20 W, 13MHz

Ar+ Density

13Monte Carlo to compute IEADFs (3)Position : Wafer center

Ion Flux

Estimated(compare to MC)

Elow
Ehigh

Monte Carlo Computation:
Elow ~ 210 eV
Ehigh ~ 242 eV14206 eV
231 eVMonte Carlo to compute IEADFs (4)Position : Wafer edge

Ion Flux

Estimated(compare to MC)

Elow
Ehigh

Monte Carlo Computation:
Elow ~ 210 eV
Ehigh ~ 226 eV15214 eV
223 eVMulti-frequency CCP
Dual frequency on one electrodecan be set easily

16Spice coupling
CFD-ACE+ Plasma solver accounts for external circuit interactions to agreater degree of generality. Proposed external circuit coupling to SPICE
will enable generic circuit representations at several reactor surfaces.

17形状シミュレータ

CFD-TOPO

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Topology simulation by CFD-TOPO※ Input file can be obtained by CFD-ACE+Etching

CVD

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Swarm パラメータ，反応レートの Lookup Table 作成ツール

Bosprom20

プロパゲータ法 (分布関数 𝑓(𝜐) 計算法の一種)
𝑛e 𝑟, 𝑡𝑇e 𝑟, 𝑡

流体モデル
CFD-ACE+など
近似：Maxwell分布二項近似

Boltzmann eq. 𝒇(𝒓, 𝝊, 𝒕)

BOLSIG+, CFD-ACEなど
近似： 𝑓 ∝ 𝐹0 𝜀 + 𝐹1 𝜀 cos 𝜃

近似：位置空間一様簡略化Boltzmann eq.

確率的解法

𝜕𝜕𝜕𝑓 𝜐, 𝜃, 𝑡 = −𝑎+𝑓 𝜐, 𝜃, 𝑡𝜕𝑡𝜕𝜐𝑥𝜕𝑡 collMonte-Carlo法
MagBoltzなど

直接解法

プロパゲータ法
Bosprom(Boltzmann Solver by Propagator Method)

衝突断面積 → 分布関数 𝑓 → 反応レート定数, 輸送係数(移動度, 拡散係数)
Swarm parameters
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Bosprom:衝突断面積データ選択・編集画面•

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断面積データの編集が可能

Bosprom:計算条件設定画面・収束状況表示

23Bosprom:結果表示画面

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Bosprom:プラズマ計算用 lookup-table 作成画面••

計算結果から Te ベースの LUT (lookup-table) を作成
CFD-ACE+ や BOLSIG+のファイルを import してグラフ表示・編集も可能
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Lennard-Jones
パラメータ推算ツール

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分子の加算因子・沸点から Lennard-Jones パラメータを推算
熱流体・プラズマのシミュレーションで必要となる species data を準備

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電子衝突断面積の推算ツール

QEC
反応モデルのデータベース

QDB
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Quantemol Ltd was founded in 2004 as a spin-out of University College London’s Physics Department.
We develop software tools based on highly sophisticated research codes and provide unique data forplasma modelling
We can offer as consultancy:
 Elastic collisions and momentum transfer • Electron collision cross-section calculations• Calculations for new type of molecules Electron and rotational excitation(such as precursors for deposition)
 Super-elastic cross-sections• Photoionization calculations• Cross-sections for molecules containing heavy
 Quenching cross-sections
atoms (Ti, In, I, Ga …)
 Dissociative electron attachment• Electron impact dissociation
 Electron impact ionisation• Electron impact ionisation… and more!
… and more!

 > 40 pre-assembled self-consistent chemistry sets
 Download formats for plasma modelling software:
QVT, CHEMKIN, Comsol, CFD-ACE+, VizGlow...
 Dynamic Chemistry for fast chemistry assembling Data comparison between individual reactions
 User-friendly interface• Assemble a chemistry set for your gas mixture• Optimise it for your pressure conditions
reducing from hundreds to dozens of reactions
without loosing key reactions• Estimate or calculate missing reactions• Create a surface chemistry mechanisms set &calibrate it with your experiment• Run multiple calculations & conduct asensitivity analysis for explored contributing
factors

Based in London, we work with academic and industrial partners around the globe, including customers in:29

Cross sections validation by QEC
Input: ONLY geometry!
Output: cross sections, Reaction rates
Total cross sections for e-CH4“Methane/hydrogen plasmas havebeen reported to be sources both for aC:H film deposition and for compound
semiconductor etching.” – Duan 2011¥

Dissociative attachment to Cl2“Atomic chlorine and its ions are a very
common in silicon etching… and thus data
regarding the chlorine molecule’s dissociation
are needed. The chlorine gas is highly toxic
and therefore measurements of this substanceare dangerous” – Hamilton 201730

Dynamic Chemistry App
Feed gases• Choose your chemistry among the species available
in QDBSpecies• The app will scan the database and find all possiblespecies related to your chemistry. Choose the ones
you want to be included in your setReactions• The app will search for all reactions with the species
you chose. You can select ones you want to include

Gold users: Download data in formats
compatible with: HPEM, CFD-ACE+ (CHEMKIN),COMSOL, VisGlow
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Set Generation※ Dynamic Chemistry App の例

NH3 と SiH4 を選択した例

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Chemistry Set

Species と reaction steps の確認※ 2019年12月10日現在
17053 reaction data33

Model Settings

装置の寸法やプロセス条件の設定

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Results

計算終了後の結果

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Results (Final neutral species)36

中性粒子の数密度の結果