サムコ株式会社 会社紹介
プラズマ材料科学第153委員会
第147回研究会『プラズマ触媒の基礎と最新動向』

2020年11月12日(木)Page 1

東日本営業部 部長
蓮沼 憲寿

This presentation and the information contained within it is the property of Samco Inc. and is confidential. Any duplication, disclosure, distribution, dissemination or copying of
this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of Samco.

サムコ株式会社のハイライト

1979年
京都に設立

171人
従業員数6387

東証一部上場20

グローバル拠点

4000台

装置納入実績

2020年7月期の決算概要

58.6億円

売上高（過去最高）

Page 2

6.3億円

純利益（過去最高）

7.4%
ROE

This presentation and the information contained within it is the property of Samco Inc. and is confidential. Any duplication, disclosure, distribution, dissemination or copying of
this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of Samco.

非シリコン市場のプラズマ装置メーカー

MicroLED,
LED

Laser,VCSEL

Photonic
CrystalPower
DeviceRF
DeviceRF
FilterCapacitor

MEMS,
TSV

FailureAnalysis

R&D

プラズマCVDソリューション: ALD, PECVD, LSCVD®, DLC Coating

ドライエッチングソリューション: ICP, RIE, DRIE, XeF2
ドライ洗浄ソリューション: Aqua Plasma®, Plasma Cleaning, UV Ozone Cleaning

化合物半導体を中心とする非シリコン市場に、プラズマCVD、ドライエッチング、ドライ洗浄装置を提供するグローバル中堅企業
Page 3This presentation and the information contained within it is the property of Samco Inc. and is confidential. Any duplication, disclosure, distribution, dissemination or copying of
this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of Samco.

パワーデバイスのゲート絶縁膜形成用ALD装置
 ALD（原子層堆積）法によるSiO2、AlOx成膜
 絶縁特性に優れた緻密な成膜が可能

プレーナ型

トレンチ型

名古屋大学未来エレクトロニクス集積研究センターに装置納入（2019年）
Page 4This presentation and the information contained within it is the property of Samco Inc. and is confidential. Any duplication, disclosure, distribution, dissemination or copying of
this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of Samco.

化合物半導体用ICPエッチング装置
 ø2” ~ ø6” 小径ウエハ専用
 GaN, GaAs, InP,SiC, Ga2O3, Diamondなど
次世代材料の加工が可能
GaN MicroLEDs

SiC MOSFET
Page 5GaAs VCSELs

Ga2O3

InP Lasers

DiamondThis presentation and the information contained within it is the property of Samco Inc. and is confidential. Any duplication, disclosure, distribution, dissemination or copying of
this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of Samco.

研究機から生産機まで対応可能
400台以上の実績を誇る
省スペース設計の平行平板型RIE装置

台湾LED市場を席捲した小径ウエハ
多数枚処理用カセット式ICP-RIE装置
Page 6This presentation and the information contained within it is the property of Samco Inc. and is confidential. Any duplication, disclosure, distribution, dissemination or copying of
this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of Samco.

Aqua Plasma® 還元性プラズマクリーニング
銀に効くPage 7

酸化銀

Aqua Plasma®
処理後

AquaPlasma®
による還元

銅に効
く

酸化銅

Aqua Plasma®
処理後

AquaPlasma®
による還元This presentation and the information contained within it is the property of Samco Inc. and is confidential. Any duplication, disclosure, distribution, dissemination or copying of
this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of Samco.

Aqua Plasma® 接合、滅菌への応用～ヘルスケア分野への新規参入～

接合

樹脂の常温接合によるマイクロ流体チップへの応用。

滅菌

医療器具向けにAqua Plasma®を応用したドライ滅菌装置の開発が完了し、東京大学などで評価中。

対象 カテーテル
 内視鏡などの手術用医療器具

Aqua Plasma®処理により、接合と同時に流路も親水化し、毛細管現象による送液を実現

Page 8試作装置• 安全な水蒸気が原料• 低ランニングコスト

This presentation and the information contained within it is the property of Samco Inc. and is confidential. Any duplication, disclosure, distribution, dissemination or copying of
this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of Samco.

CSR活動 研究助成 ~サムコ科学技術振興財団~
薄膜・表面・界面に関する研究分野で若手研究者を助成
助成金額 1件200万円（5件程度）
2020年9月9日（水）於：京都リサーチパーク
 2020年度 第4回研究助成金贈呈式を開催。
 物質・材料研究機構 理事長
橋本和仁先生による記念講演を開催。

Page 9This presentation and the information contained within it is the property of Samco Inc. and is confidential. Any duplication, disclosure, distribution, dissemination or copying of
this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of Samco.

ご清聴ありがとうございました。
もっと詳しく知りたいという方は、サムコ株式会社HPをご覧ください。
お問い合わせ：info@samco.co.jp

Page 10

This presentation and the information contained within it is the property of Samco Inc. and is confidential. Any duplication, disclosure, distribution, dissemination or copying of
this presentation or its contents or use for any purpose other than that for which it is supplied is strictly prohibited, without the prior written consent of Samco.