Gemini ® MPG5xx / MAG5xx
Inverted Magnetron/Inverted Magnetron Pirani Gauge
The INFICON Gemini™ Inverted Magnetron Vacuum
Gauge is the workhorse for all vacuum measurement
applications. While Gemini MPG5xx combines twosensor technologies in one small device to measurefrom atmosphere down to 1 × 10-9 mbar, the Gemini
MAG5xx is a pure cold cathode sensor system (withoutPirani element) which covers the range from 1 × 10-2mbar to 1 × 10-9 mbar. The patented ultra-low
magnetic stray field design opens up a whole new rangeof applications. A unique interchangeable dualchamber sensor unit avoids cleaning cycles andreduces maintenance, making Gemini the most robustand economical vacuum gauge of its kind.
MAG and MPG Gemini are available with EtherCAT andPROFINET fieldbus.
For corrosive applications we suggest to use theceramic coated version MxG5x4. Feedthrough andPirani inside the sensor head are fully ceramic coatedfor enhanced corrosion resistance.
ADVANTAGES• Long lifetime in harsh environments• Reliable fast ignition• Low magnetic stray field• Selectable measuring current• Fast maintenance - replaceable ionization chamber• Corrosion resistant feedthrough & sensor element• PROFINET, EtherCAT and RS232/ RS485 digital interface• Compact size - easy to integrate• 2 relay setpoints (MxG55x)
APPLICATIONS• Base pressure monitoring and control, from atmosphere to high vacuum in evaporation and sputter coatingapplications.
• General vacuum measurement – industrial furnaces, architectural glass, semiconductor, production
labratory’s..
• Analytical and R&D applications – mass spectrometry, electron microscopes, ophthalmic, optical, medical andhigh energy physics.

1Gemini® MPG5xx / MAG5xx

Gemini ® MPG5xx / MAG5xx
ORDERING INFORMATION

Output signal
MPG: p = 10^ ((1.667xU)-11.33) [hPa|mbar] Inverted Magnetron Pirani
MAG: p = 10^ ((U-12.1.666) / 1.33) [hPa|mbar] Penning
MAG: p = 10^ (U-10.5) [hPa|mbar] Inverted Magnetron 2)

PQN

3MA 0 – 0 0 6 – 0 0 0 Q
Digital interface

Type
Inverted Magnetron
Inverted Magnetron Pirani

035GAA
B

Sensor version
StandardCeramic coated feedthrough03Electrical connection

Ionization chamber
Stainless steel (SS)Titanium (TI) 1)

None
RS485
RS232
EtherCAT 3)
PROFINET 3)

010124Emission current
High current
Low current

01FCC, 8-pin
D-Sub, 9-pin 2)
D-sub HD, 15-pin, PROFINET / EtherCAT 2), 3)
2)
D-sub HD, 15-pin, RS232/485

Switching functions
06

None
2 setpoints (mechanical) 3), 4)

Flange678Q1)
2)
3)
4)

2

DN 25 ISO-KF
DN 40 ISO-KF
DN 40 CF-R
DN 40 CF-FFor low current version onlyNot suited for operation with an INFICON vacuum gauge controller VGC40x or VGC50xMxG55x in large housing and with switching functions
Set points only available with PROFINET & EtherCAT digital interface (mandatory) and not with any other digitalinterface or electrical connection

Gemini® MPG5xx / MAG5xx

Gemini ® MPG5xx / MAG5xx
Spare parts

MAG5xx

MPG5xx25 KF, SS

351-500–

25 KF, Ti

351-502–

40 KF, SS

351-512–40 KF, Ti

351-514–40 CF-F, SS

351-524–

40 CF-F, Ti

351-526–

40 CF-R, SS

351-536–

40 CF-R, Ti

351-538–

25 KF, SS

351-501–

25 KF, Ti

351-503–40 KF, SS351-513–

40 KF, Ti

351-515–40 CF-F, SS

351-525–

40 CF-F, Ti

351-527–

40 CF-R, SS351-537–

40 CF-R, Ti
MPG500 spare sensor

351-539–25 KF, SS–

351-506

25 KF, Ti–

351-508

40 KF, SS–

351-51840 KF, Ti–

351-52040 CF-F, SS–

351-53040 CF-F, Ti–

351-532

40 CF-R, SS–

351-542

40 CF-R, Ti–351-544

25 KF, SS–

351-507

25 KF, Ti–351-509

40 KF, SS–

351-51940 KF, Ti–351-521

40 CF-F, SS–

351-53140 CF-F, Ti–

351-533

40 CF-R, SS–

351-543–351-995
351-555351-556351-545351-995351-555351-556

MAG500 spare sensor

MAG504 spare sensor

MPG504 spare sensor

40 CF-R, Ti
MxG50x spare parts ignition aid (10 pieces)
Spare ion chamber SS
Spare ion chamber Ti

3Gemini® MPG5xx / MAG5xx

Gemini ® MPG5xx / MAG5xx

4Accessories

MAG5xx

MPG5xxBaffle for DN 25 KF flange
Centering ring with baffle DN 25 KF
Centering ring with fine filter DN 25 KF
MxG50x ignition tool set

353-512211-113
211-098351-550353-512211-113
211-098351-550

Gemini® MPG5xx / MAG5xx

Gemini ® MPG5xx / MAG5xx
SPECIFICATIONSTypeMeasurement system

MAG5xx

MPG5xxCold Cathode ionization

Pirani and Cold Cathodemeasurement sensor (according to theionization measurement

inverted magnetron principle)

sensor (according to theinverted magnetron principle)

Measurement range (air, N2)
1 × 10-9 ... 1 × 10-2

1 × 10-9 ... 1000

7.6 × 10-10 ... 7.6 × 10-3

7.6 × 10-10 ... 760

1 × 10-8 ... 1x10-2 mbar

30% of reading

30% of reading

1 × 10-2 ... 100 mbar–

30% of reading

100 ... 1000 mbar
Repeatability (N2)–

50% of reading

5% of reading

5% of reading–

5% of readingmbar
Torr
Accuracy (N2)

1 × 10-8 ...1 × 10-2 mbar
1 × 10-2 ... 100 mbar
Mounting orientation
Admissible pressure (absolute)
Admissible temperatureany
10 bar (limited to inert gases <55°C)

Operation (ambient)+5 ... +55°C

Bakeout at flange 1)+150°C

Storage
Filament
Relative humidity for 30 days a year
1 × 10-7 1 × 10-2 mbar
1 × 10-8 1 × 10-2 mbar

–40 ... +70°C
120°C (MPG5xx only)≤95% RH (non-condensing)≤70% RH (non-condensing)

Supply voltage
At gauge 2)

5+14.5 ... +30 V (dc)

Ripple≤1 VppPower consumption≤3 W

Fuse to be connected
Voltage range (analog output)
Output impedance≤1 AT
0 ... +10.5 V
2 × 4.7 Ω (short circuit-proof)

Load impedance
Measurement range≥10 kΩ (short circuit-proof)

3MAx-xxx-xxxN+1.5 ... +8.5 V

3MBx-xxx-xxxP+1.398 ... +8.598 V

3MAx-xxx-xxxQ
Voltage vs. pressure+0.667 ... +10 V

3MAx-xxx-xxxN

1 V/decade (logarithmic)

3MBx-xxx-xxxP

0.6 V/decade (logarithmic)

3MAx-xxx-xxxQ

1.33 V/decade (logarithmic)

1)

Without electronics

2)

The minimum voltage of the supply unit must be increased proportionally to the length of the sensor cable

Gemini® MPG5xx / MAG5xx

Gemini ® MPG5xx / MAG5xx
TypeMAG5xx

MPG5xx

Step response time (pressuredependent)>1x10-6 mbar
1x10-6 ... 1x10-8 mbar
Gauge identification
Status signal (digital output)<100 ms≈1 s
100 kΩ

85 kΩ

FCC connectorCurrent rating

100 mAHigh voltage is ON+14.5 ... +30 V (dc) (depending on supply voltage)

High voltage is OFF

0 V (dc)

D-sub connector
Current rating

100 mA (sink)

High voltage is ON

0 V (dc)

High voltage is OFF

open

Supply voltage
Cable length≤30 V (dc)

50 m cable≤50 m (8x0.14 mm2)

75 m cable≤75 m (8x0.25 mm2)

100 m cable≤100 m (8x0.34 mm2)

300 m cable≤300 m (8x1.00 mm2)

FCC connector cable
High voltage (in the measuring chamber)
Ignition voltage
Operating voltage
Current (in the measuring chamber)≤50 m (0.14 mm2/conductor)≤4.5 kV≤3.3 kVHigh current
Low current≤380 μA≤130 μA

Setpoint relays (MxG55x)
Range (N2)

5 × 10-5 ... 1500 mbar

Relay contact

normally open (ON), potential free

Hysteresis
Contact rating of mechanical relays
Switching time
Materials exposed to vacuum
Internal volume

6

10% of threshold≤30 V / ≤1 A
≤30 msW, Ni alloy, Mo, AI2O3, glass, Ti, stainless steels

DN 25 ISO-KF≈19.9 cm3

DN 40 ISO-KF≈20.9 cm3

DN 40 CF-F

≈25.2 cm3

DN 40 CF-R

≈25.6 cm31)

Without electronics

2)

The minimum voltage of the supply unit must be increased proportionally to the length of the sensor cable

Gemini® MPG5xx / MAG5xx

Gemini ® MPG5xx / MAG5xx
TypeMAG5xx

MPG5xx

WeightMxG50xDN 25 ISO-K<280 g

DN 40 ISO-KF<320 g

DN 40 CF-F & CF-R

<570 g

MxG55xDN 25 ISO-K≤500 g

DN 40 ISO-KF≤530 g

DN 40 CF-F & CF-R
Degree of protection
Standards CE conformity
EMC

2014/30/EU (EN 61000-6-2, EN61000-6-3 EN61326-1)

RoHS

2011/65/EU

SafetyBaud rates (RS232C/485C)
Address (RS232C/485C)
Digital functions

Connector for RS232 & RS485

7≤780 gIP40

EN 61010-1
9.6 / 19.2 / 38.4 / 57.6 kBaud
2 switches (address 00 - 255)
Read pressure, select units: Torr, mbar, Pa, micron, counts monitor gauge status,
detailed alarm and warning
information, saft state alllows definition of behaviourin case of error
D-sub HD, 15-pin, male1)

Without electronics

2)

The minimum voltage of the supply unit must be increased proportionally to the length of the sensor cable

Gemini® MPG5xx / MAG5xx

Gemini ® MPG5xx / MAG5xxSPECIFICATIONS INTERFACES
EtherCAT®
ProtocolCommunication standards
Process Data
EtherCAT connector
Cable
Cable length
Data rate

EtherCAT®
Semiconductor Device Profile
ETG.5003 Part 1 Common Device Profile
ETG.5003 Part 2080 “Specific Device Profile - Vacuum Pressure Gauge"
Fixed PDO mapping and configurable PDO mapping
RJ45, 8-pin (socket), IN and OUT
Shielded Ethernet CAT5e or higher≤100 m (330 ft.)
100000 Kbps

PROFINET™
Communication protocol
Physical Layer
Digital functions
readsetProfinet connector
Cable
Cable length
Data rate

8Gemini® MPG5xx / MAG5xx

protocol specialized for PROFINET
100BASE-Tx (IEEE 802.3)
pressure, status, ID
set points, filter, zero adjust, reset, DC offset
2 × RJ45, 8-pin (socket), IN and OUT
Special Ethernet Patch Cable or Crossover Cable, shielded (CAT5e quality orhigher)≤100 m (330 ft.)
100000 Kbps

Gemini ® MPG5xx / MAG5xx
DIMENSIONS[mm (inch)]
MxG50x

MxG55xwww.inficon.com

reachus@inficon.com

Due to our continuing program of product improvements, specifications are subject to change without notice.
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