Micromachine Center Booths Planned for Exhibition Micromachine/MEMS 2010
MEMS Concierge Corner and Job Matching
Support Plaza

MEMS Foundry Network BoothThe MMC manages the Web site for a MEMS foundry
network. The Web site introduces users to companies thatprovide foundry services and also offers a service called
MEMStation. MEMStation functions as an intermediary service
for potential clients who are looking for companies that provide
a particular service.
At the Exhibition Micromachine/MEMS, we have plans foran exhibit that will introduce the types of services offered bycompanies participating in the MEMS foundry network, as wellas information on how MEMStation works and how to get themost out of it. We have also expanded the services available
through MEMStation. This year we have introduced follow-up
counseling whereby, if companies registered with the MEMS
foundry network are unable to meet a client’s needs, the MMC
in cooperation with the National Institute of Advanced
industrial Science and Technology (AIST) will investigate andrecommend companies capable of filling this need. In addition,
the booth will include panel exhibits and information on theMEMS foundry network.

A MEMS Concierge Corner will be provided in theMicromachine Center (MMC) booth, to one side of thereception counter. Visitors can consult with the Concierge
Corner for directions on where to go, such as when they areinterested in something specific but don’t know where to find it
or when they want to compare a specific device produced byvarious companies, and the concierge service will guide them tothe appropriate booths. Please don’t hesitate to drop by withyour questions.
This year for the first time, an experimental Job Matching
Support Plaza will be set up near the MMC booth. The Plaza isdesigned to serve as a place for students interested in
micro/nano-related industries to learn about companies looking
to hire outstanding talent. Company and employment
information will be posted in the Job Matching Support Plaza,
enabling students (visitors) to directly visit the booths ofcompanies they are interested in, collect information, and get afeel for the company and the type of work available. For
companies, the Plaza may simply offer the benefit of
employment-related publicity, but we anticipate that it will
provide them opportunities to get in contact with potential
employees.

Standardization BoothThis booth presents the current status of standardization in
the MEMS industry. To promote international standardization
activities in the MEMS industry in a more strategic manner, theMMC has established a roadmap for MEMS standardization, andstandardization activities are being conducted in accordancewith this roadmap. The booth showcases the international
standards that Japan has proposed and established to date,including a tensile testing method of thin film materials, a thinfilm standard test piece for tensile testing, and axial fatigue
testing methods of thin film materials, in addition to drafts thatare currently being reviewed by the International
Electrotechnical Commission (IEC), such as a method for
fatigue testing thin film materials using the resonant vibrationof a MEMS structure, wafer-to-wafer bonding strength
measurement for MEMS, and bonding strength tests for thinfilm materials and standard test pieces for calibration. The
booth will also introduce the current status of drafts currently
under development for micro-gyroscopes, electronic
compasses, and methods of measuring microscale structures,and will display the actual publications that have already been
issued for MEMS-related international standards and JISstandards.

MemsONE BoothMemsONE is a design tool that provides powerful support
for MEMS design and manufacturing processes and is anindispensable tool for MEMS experts, but easy enough to use
for beginners with little experience in MEMS. This marks thethird year since full-fledged MemsONE dissemination activities
began. During this period, versions 1.1, 2.0, and 3.0 of theproduct have been released, giving MemsONE enhanced, more
powerful functions and greater stability. Version 3.0 released inJanuary this year has even more improvements in analysis
capabilities and user-friendliness. To further promote anddisseminate MemsONE, a consultation corner will be provided
at the MemsONE booth for use support. In addition, theacademic version of MemsONE will be offered for a limited time
at no charge, and the product will be promoted through videos
and computer demonstrations. Updated information on theMemsONE functions will also be provided at the MEMS
Industry Forum Workshop.

MEMS Mall BoothMEMSPedia BoothThe MEMS Mall is a Web site that enables MEMS-relatedcompanies to introduce their MEMS products and technologies
on the Internet. On the MEMS Mall Web site, companies
involved in MEMS manufacturing-related fields can provide
information on MEMS devices and applications, biomedicalrelated products, MEMS manufacturing equipment,
nanoimprint technology, MEMS design tools, foundry services,evaluation, measurement, and inspection equipment, andmaterials.
Individual company data on the MEMS Mall Web site may
also include a link to the company’s home page, with the idea ofconnecting MEMS users to suppliers over the Internet. The
member companies of the MEMS Industry Forum make up thecore of registered companies, but participation in the Mall isopen to other companies for a fee. The MEMS Mall booth will
also feature computer terminals connected to the Internet,
allowing visitors to access and explore the Mall.

The Highly Integrated, Complex MEMS (Fine MEMS)
Production Technology Development Project produced adatabase storing knowledge data (1500 entries) sorted bykeywords used in the Fine MEMS Project and patent data (4500entries) sorted by R&D topics, and a MEMS equivalent circuit
generator for generating models that are capable of simulating
MEMS operations with a circuit simulator. In June 2009, thesedata and tools were made available to the general public on theInternet as an encyclopedia called MEMSpedia, which includes
knowledge data, design tools, and a variety of open content.
During the approximate one-year period since MEMSPedia wasmade public, the database has been accessed more than
670,000 times, and the number of users is expected to continue
to grow. The MEMSPedia booth provides descriptions of theknowledge database and the MEMS equivalent circuit generator
and instructions on using these tools through panel exhibits andcomputer terminals that are available for the visitors’
convenience.

2