Highly effective, dry, non-acidic,non-destructive cleaning systemusing intense UV light for removalof organic contaminants

UV Ozone Cleaner◆ Compact standard models◆ 12 inch wafer compatible models◆ 16 inch wafer compatible models

Filgen,Inc.

What is UV ozonecleaning?

Benefits of UV ozone cleaning Non-destructive cleaning method applicable for various types of substrates.
 Easy to remove organic contaminants on substrates which couldn't be completely
cleaned by ultrasonication.
 Capable to remove residual organic solvents used in wet cleaning process.
 Operates at normal pressure. No vacuum required.
 Perfect solution for substrate pretreatment for thin film coating.

Principal of UV Ozone Cleaning
UV ozone cleaning is a photosensitized oxidation process using short wavelength UV light. During
this process, organic contaminants such as photoresist, resin, silicon oil, and flux are decomposedby absorbing UV radiation with short wavelength. Reactive oxygen species (ROS) are simultaneously
generated when molecular oxygen is dissociated by 184.9 nm and ozone by 253.7nm. Most of the253.7 nm UV light is absorbed by hydrocarbons and ozone. The products of the decomposedcontaminants react with the ROS and form simpler volatile molecules (eg. CO 2 , H 2 O etc.), thendetach from the substrate surface. When both 184.9 nm and 253.7 nm wavelengths UV light exist,
oxygen atoms continue to be generated and turn into ozone, then the ozone decompose.

UV lights at the wavelength 184.9 nm
and 253.7 nm equal to the UV energyof 647 KJ/mol and 472 kJ/mol
respectively. Bonding energy ofvarious organic combinations is listed
in the right table.

BondO–OO=O
O–H
C–C
C–H
C–N
C≡N
C–O

Energy(KJ/mol)
138.9
490.4
462.8
347.7
413.4
291.6
791.0
351.5

Bond
C=CC≡C
C=O
C–Cl
H–F
C–F
H–Cl
N–H

Energy(KJ/mol)
607.0
828.0
724.0
328.4
593.2
441.0
431.8
390.8

A highly effective, dry, non-acidic,non-destructive cleaning method byphotosensitized oxidation processusing short wavelength UV light.

Effect of UV ozone cleaning - improvement of wettability
The following photos indicate improvement of wettability on glass surface by UV ozonecleaning. Before and after 15, 30 min treatment, same volume of Milli-Q water wasdropped and its shape and contact angle were observed.
This suggests that organic contaminants on the surface were removed as time passes by
UV ozone cleaning.

Before treatment

After 15 min treatment

After 30 min treatment

Applications
Pretreatment of thin film coating
 Functional film cleaning (eg. ITO film)
 Substrate cleaning before several thin film deposition process
 Photoresist removal
 Cleaning for electronic-, mechanical-, and optical-components (eg. wafers, lens, mirrors, solar
panels, LCD panels, and circuit boards etc.)
 Improvement of adhesion for protective coating on plastic surface.

Electron microscope related
 Removal of organic contamination on SEM/TEM specimens
 Improvement of wettability and hydrophilicity for diamond or glass knives, and support filmOthers Cleaning for AFM cantilever PDMS surface modification
 Cleaning hermetic seal for ultra-high vacuum Removal of flux
 Etching for organic functional materials
 Glass degassing Removal of dicing tapes and marking ink from surface of wafers
 Annealing of Ta2O5 film

Features of Filgen’s
UV ozone cleaners

No ozone leak
High concentration ozone is toxic for human and animals, and may cause deterioration ofUV ozone cleaner itself and other lab equipment if it leaked from chamber.
Filgen's UV ozone cleaner, model UV253V8 equips a gas tight chamber with 0.02MPa ofproof pressure. For other models, Ozone-Killer which is provided as standard can reducerisk for ozone exposure.

Keep clean
Filgen's UV ozone cleaner has 2 intake ports for gas delivery both before and after UVozone cleaning process, and 1 exhaust port. This enables to keep clean inside of chamber
through whole cleaning process, by connecting with gas cylinders. Gas supply and exhaustare automatically controlled by solenoids.

Different types of UV lamp
We, Filgen provide 2 types of UV lamp, made with fused quartz and synthetic quartz asstandard and an optional ozone-free UV lamp, for all models.
* Synthetic quartz UV lamps could radiate wavelength 184.9 nm lights more effective, and may
improve whole cleaning efficiency.

High power and uniform UV light
The grid UV lamps installed in Model UV253H/12H/16H deliver quite high powered anduniform UV light. We, Filgen also provide more affordable models equipped with straighttube UV lamps.
Grid UV lamp

Straight tube UV lamps

Introduced to 400+ customers.
Excellent customer support based onlong-term experience and know-how.

Compatible with 3 different sized wafers
Model UV253V8 and UV253H, compact standard models are compatible with 8 inch wafer.
We also provide larger models compatible with 12 inch and 16 inch wafers. All Filgen's UVozone cleaners equip a chamber of which more then 120 mm height, so enable to process
various samples.

Compact standard
Model# UV253V812” wafer compatible
Model# UV253H1216” wafer compatible
Model# UV253V1616” wafer compatible
Model# UV253H16(with mount rack)

Ozone-Killer, an external unit for ozone decomposition
Ozone-Killer is automatically controlled by UVozone cleaner, and offers safe decompositionof residual ozone. This external unit has thesame appearance design and footprint with UVozone cleaner.
Ozone-Killer UV253-OZ *upper unit

Optional accessories for more safely use
For users who are demanding higher safety, 2
optional accessories are available. Ozone
detection system enables to monitor ozone
concentration in the chamber, and Automaticlocking system provides mechanical lock forthe door during UV irradiation. These 2 units
can be combined and offer the highest safety.

Ozone detection system Automatic locking system
UV253-OZDITECTUV253-OZLOCK

Products◆ Compact standard models◆ 12” wafer compatible models◆ 16” wafer compatible models

Compact standard
Model# UV253V816” wafer compatibleModel# UV253V1612” wafer compatible
Model# UV253H12Specifications – Compact standard models
Model#Chamber dimensions
TypeLight
sourceShape
Number of lamps
Wavelength
UV intensity
O2 timer
UV radiation
timer
Timers N2 / exhaustingtimer
Operating time
integrator
Ozone-Killer
Power outlet
for Ozone-Killer
SafetyUV lamps
interGas
supplies
locking
External dimensions
PowerOptional accessories

UV253V8
UV253V8R
UV253HUV253HR
204(W)×207(D)×142(H) mm
208(W)×205(D)×168(H) mm
Low-pressure mercury
Low-pressure mercury
Low-pressure mercury
Low-pressure mercurylamp, fused-quartz
lamp, synthetic-quartz
lamp, fused-quartz
lamp, synthetic-quartz
Straight tube
Grid31184.9 nm, 253.7 nm
3.7 mW/cm2 (per single lamp)
28 mW/cm2✔ (digital)✔ (digital, shared with UV timer)✔ (digital)✔ (digital, shared with O2 timer)✔ (digital)✔ (digital)✘✔

Optional

Included✔
✔
✔

400(W)×300(D)×260(H) mm
100VAC 50/60Hz 5A
Ozone-Killer / Flowmeters / Ozone detection
system / Automatic locking system

400(W)×370(D)×270(H) mm
100VAC 50/60Hz 5A
Flowmeters / Ozone detection system /Automatic locking system

Specifications – 12” / 16” wafer compatible models
Model#UV253V12 UV253V12R UV253V16 UV253V16R UV253H12 UV253H12R UV253H16 UV253H16R
335(W)×330(D)×128(H) 438(W)×430(D)×130(H) 335(W)×330(D)×168(H) 438(W)×430(D)×160(H)mmmmmmmmLowLowLowLowLowLowLowLowpressurepressurepressurepressurepressurepressurepressurepressure
mercury
mercury
mercury
mercury
mercury
mercury
mercury
mercury
Type
lamp,
lamp,
lamp,
lamp,
lamp,
lamp,
lamp,
lamp,
Lightfusedsyntheticfusedsyntheticfusedsyntheticfusedsyntheticsource
quartzquartzquartzquartzquartzquartzquartzquartzShape
Straight tube
Grid
Number of lamps
5736Wavelength
184.9 nm, 253.7 nm
UV intensity
5.2 mW/cm2 (per single lamp)
28 mW/cm2 (per single lamp)
O2 timer✔ (digital)✔ (digital, shared with UV timer)
UV radiation✔ (digital)✔ (digital, shared with O2 timer)
timer
Timers N2 / exhausting✔ (digital)✔ (digital)
timer
Operating time✘✔
integrator
Ozone-Killer
Included
Included
Power supply for Ozone✔
KillerSafetyUV lamps✔
inter✔
locking Gas supplies
630(W)×600(D)×280(H)
530(W)×510(D)×480(H) 630(W)×600(D)×480(H)
530(W)×510(D)×270(H)External dimensions
mmmmmmmm
Power
100VAC 50/60Hz 15A
100VAC 50/60Hz 23A
Optional accessories
Flowmeters / Ozone detection system / Automatic locking system / Mount rack
Chamber dimensions

Consumables,
Optional accessories

UV lamps
3 types of lamps are available for all models. You can choose one depending on thepurpose of use.
Model
UV253V8

UV253V12

UV253V16

UV253HUV253H12UV253H16

UV lamps
Straight tube, fused-quartz UV lamp, 3 pack (1 set)
Straight tube, synthetic-quartz UV lamp, 3 pack (1 set)
Straight tube, ozone-free UV lamp, 3 pack (1 set)
Straight tube, fused-quartz UV lamp, 5 pack (1 set)
Straight tube, synthetic-quartz UV lamp, 5 pack (1 set)
Straight tube, ozone-free UV lamp, 5 pack (1 set)
Straight tube, fused-quartz UV lamp, 7 pack (1 set)
Straight tube, synthetic-quartz UV lamp, 7 pack (1 set)
Straight tube, ozone-free UV lamp, 7 pack (1 set)
Grid, fused-quartz UV lamp, 1 pack (1 set)
Grid, synthetic-quartz UV lamp, 1 pack (1 set)
Grid, ozone-free UV lamp, 1 pack (1 set)
Grid, fused-quartz UV lamp, 3 pack (1 set)
Grid, synthetic-quartz UV lamp, 3 pack (1 set)
Grid, ozone-free UV lamp, 3 pack (1 set)
Grid, fused-quartz UV lamp, 6 pack (1 set)
Grid, synthetic-quartz UV lamp, 6 pack (1 set)
Grid, ozone-free UV lamp, 6 pack (1 set)

Product No.
UV253V8-L3
UV253V8R-L3UV253V8F-L3UV253V12-L5UV253V12R-L5
UV253V12F-L5UV253V16-L7
UV253V16R-L7
UV253V16F-L7
UV253H-LUV253HR-L
UV253HF-L
UV253H12-L3
UV253H12R-L3
UV253H12F-L3
UV253H16-L6
UV253H16R-L6
UV253H16F-L6

Ozone-Killer
An optional accessory for ozone decomposition.
Capable to use our UV Ozone cleaner safely
without any local ventilation systems. Exclusive
for the model# UV253V8(R)Ozone decomposition
methodExhausting speed
External dimensions
PowerCatalystic
6 L/min400(W)x300(D)x110(H) mm
100VAC 50/60Hz 1A

Ozone detection system

Automatic locking system

Enable to check ozone
concentration inchamber. Provide thehighest safety whencombined with OzoneKiller and Automaticlocking system.

Decrease risks against
ozone exposure and UV
irradiation. During UVradiation, an mechanicallock prevents door open
due to human error.

For more details, please check our website: https://filgen.jp/Product/SI/English/UV/

Filgen, Inc.
Scientific Instruments Dept.
1-1409 Jonoyama, Midori-ku, Nagoya 459-8011
JAPANTEL: +81 52-624-4388Email: si-support@filgen.jp
https://filgen.jp/(JUL 2019)