MMC Activities..............1
Members’ Profiles .........7
Worldwide R&D ............8

MMC Activities

The Research Reports under the 9th MicromachineTechnology Research Grant
This research grant program started inviting applications in 1993 as a part of the independent activities of MMC.
The purpose of the program is to assist college and university staff engaged in basic research on micromachines, andto promote further development of micromachine technology and communication between academics and people in
the industrial world.
Among the themes selected for the ninth (2001) research grant, nine research projects, including six 2-year
projects carried over from fiscal 2000 and three 1-year projects of fiscal 2001, have been completed.
The following are four summaries of the research results of the carried over projects.

No.

Subjects

Leader and
Co-Worker

Affiliations

Period1

Development of Highly LightSensitve Film Systems for MicroProf.Takahiro Seki
Relief Formation and Their
Applications

Professor, Department of Applied
Chemistry, Graduate School of Engineering, Nagoya University

2 Years

2

Electrochemical Immobilization ofProf.Tetsuya Haruyama
Engineered Protein for micro TAS

Professor, Department of Biological
Functions and Engineering, Kyushu
Institute of Technology

2 Years3

Development of Nano-Probe Prof. Kiyoshi Tamakasu
System for Nano-CMM(Coordinate Measuring Machinewith nanometer Resolution)
Prof. Ryoshu Furutani

Carried-Over Projects Granted for Fiscal 2000

Prof. Tatsuo Arai

4

Micro Hand System Capable of 3-D
Tracking
Dr. Tamio Tanikawa

Affiliations as of May, 2003.

Internet Home Page : http://www.mmc.or.jp/

Professor, Department of Precision
Engineering, The University of Tokyo
2 Years
Professor, Department of Precision
Engineering, Tokyo Denki University
Professor, Department of Systems
Innovation, Graduate School of Engineering
Science, Osaka University
Senior Researcher, Division of Intelligent
Systems, Advanced National Institute of
Science and Technology

2 YearsDevelopment of Highly Light-Sensitive Film Systems for Micro-Relief
Formation and Their Applications
Takahiro Seki, Professor, Department of Applied Chemistry, Graduate School of Engineering,
Nagoya University
1. Introduction

0

200 [ nm ]Recently a method has been found for forming relief structures by
exposing polymer films containing azobenzene molecules to patternedlaser light, causing the material to migrate laterally. Our groupdeveloped a system capable of rapidly inducing mass migration within
seconds by exposing a flexible liquid crystal polymer to light. In order
to increase our understanding of this mass migration phenomenon andto contribute to micromachine technology, we studied the feasibility ofusing this system as a conveyor for other materials.

0
5

5
10

10

2. Development of Novel Polymers

15

15

By introducing oligo(ethylene oxide) into the polymer as acopolymer, we developed an azobenzene polymer in which massmigration is induced with high sensitivity. Using this polymer, wefound that relief formations can be preserved, even at temperatures of
250 degrees celsius, by cross-linking the hydroxyl end group of theethylene oxide. We learned it is possible to overcome properties thatrun counter to highly sensitive light-induced migration and thepreservation of stable formations. Fig. 1 is an image taken through an
atomic force microscope of a relief formed with a grid-shaped mask.

Fig. 1 An example AFM image of a relief formed bylight-induced mass migration

3. Photo-Conveyance of Functional Materials
Using this phenomenon of migration in film materials, we studied
the inducement of migration in other functional materials (Fig. 2).
This study showed us that migration is possible in dyes, conjugatedpolymers, and particles on the order of nanometers. This knowledge is
expected to become a new elemental technology for micromachines.

Fig. 2 A conceptual drawing showing patterning by
conveyance of functional materials using
light-induced migration

Electrochemical Immobilization of Engineered Protein for micro TAS
Tetsuya Haruyama, Professor, Department of Biological Functions and Engineering,
Kyushu Institute of Technology
1. Introduction
Proteins like enzymes and antibodies have specific affinities,
catalytic activity, and other superior functions. Devices that make useof these functions include bioreactors and biosensors achieved throughimmobilized enzymes and immunosensors achieved throughimmobilized antibodies. We have seen many attempts to develop
devices by reducing the size of these bioreactors and biosensors andemploying them as micro total analysis systems( µTAS) for applicationsin health care or food inspection. However, various restrictions make it
difficult to immobilize functional proteins on a miniaturized site. In thisstudy, we controlled the molecular orientation of immobilized protein
and attempted to develop an electrochemical immobilization method forreversibly immobilizing protein.

Protein targeted
for immobilization

N
N

N

M2+

N
N

Electrochemical
reduction

N

N

N

N

N

N

N

Protein targeted
for immobilization

EC-tag

2. Genetical Insertion of EC-tags and Electrochemical Immobilization of Proteins

NNN

A principle of immobilization is to genetically add an EC-tag sequence(an amino acid sequence to become a divalent metal-ion coordinationsite) into the amino acid sequence of an immobilized protein and to
configure divalent metal ions in this EC-tag site. We discovered a methodof immobilization in which the coordinated metal ions are restored fromtwo valences to zero by applying a reduction potential to the protein inthis state at an electrode surface. At this time, the protein is immobilizedon the surface of the electrode (Fig. 1). Protein immobilization performed
according to the above process is stable even after ceasing the potential
application and can be separated through a counterreaction.
Fig. 2 shows an atomic force microscope photo of an experimentusing this method to immobilize a model protein on the end of a
cantilever. In this example, the applied potential is focused on the radical
end through an edge effect to achieve protein immobilization only aroundthe end of the cantilever. This suggests the possibility of orientational
immobilization of monomolecular proteins using the extreme radical end
solid phase. Further, this method of immobilization can be used
universally for many proteins by genetically inserting an EC-tag in theamino acid sequence of the protein. The potential for designing molecularorientation using this method has engendered great promise for its
applications.

N

M

N

N

N
N

N

N

N

N

Patent application No. 2003-069924

Fig. 1 Hypothetical scheme of EC tag-protein immobilization

AccV Probe Mag WD

500nm

10.0kV 2.5 x 20000 16 -50

Fig. 2 SEM photograph of protein immobilized on
the end of a cantilever by an EC-tag

2

Development of Nano-Probe System for Nano-CMM (Coordinate Measuring Machinewith Nanometer Resolution)
Kiyoshi Takamasu, Professor, Department of Precision Engineering, The University of TokyoRyoshu Furutani, Professor, Department of Precision Engineering, Tokyo Denki University
1. Introduction

3. Conclusion

When developing micromachines and small optical elements, it isnecessary to perform traceable 3D measurements of the micromachine andits parts or the optical element in nanometer resolution. While practicaltechnologies for traceable measurements of surface shapes on a nanometerscale have been made achieved with scanning tunneling microscopes andatomic force microscopes, a measuring machine for measuring threedimensional sizes and positions has yet to be adequately developed. Thus,
it is necessary to develop a 3D measuring machine with nanometer
resolution, that is, a nanometer coordinate measuring machine (nanoCMM). The probe system in this nano-CMM has been deemed the mostdifficult to develop. In this study, a nano-probe system was developed by
combining mechanical contact with optical sensing of that contact.

As described above, we developed a nano-CMM and a nano-probe as
basic tools for developing future micromachines. However, there are many
issues that remain unresolved before these devices can be actually used,such as establishing a method for calibrating the measuring machine,
improving reliablity of measurements, and evaluating the device's aging.
Laser diodeQuadrant
photodiodeFig. 1 Basicprinciples of
the nanoprobe
system

2. Development of the Nano-Probe System
As shown in Fig. 1, the nano-probe system has a mechanicallysupported stylus ball that contacts the object to be measured and employs
an optical system for directly sensing displacement of the ball. With thismethod, it is possible to construct a 2D or 3D sensing system with stable
nanometer resolution for measuring objects having various surface aspects.
Fig. 2 shows the construction of the nano-probe system and its prototype.
A small ball having a diameter of 0.5 mm or less contacts the object, while
an optical sensor comprising a laser and a quadrant photodiode detects the
movement of the ball during contact. The overall size of the apparatus isapproximately 100 x 30 x 30 mm, enabling the apparatus to be mounted in
the Nano-CMM. The resolution of the prototype nano-probe system wasevaluated and determined to be capable of achieving 10 nm or lessresolution. Further, when performing 2D measurements, crosstalk and thelike occurred between the X and Y axes. However, having achieved aresolution of about 10 nm, the probe system can be applied for the NanoCMM.

Object to
be measured

Stylus ball

150mm

Fig. 2 Construction of a nano-probe and its prototype

Micro Hand System Capable of 3-D Tracking
Tatsuo Arai, Professor, Department of Systems Innovation, Graduate School of Engineering Science, Osaka University
Tamio Tanikawa, Senior Researcher, Division of Intelligent Systems, Advanced National Institute of Science and Technology
In the future, we will apply these achievements in automanipulations
targeting such moving micro-objects as active cells.

1. Introduction
We have been developing an automated micromanipulation system forhandling and machining micro-objects under a microscope. In order toperform such auto-micromanipulations, we have developed a system for
automatically focusing the target object, a system for recognizing the object
in the focal plane and detecting its position, and a micro hand system that
integrates these two systems in order to control a two-fingered micro handto pick up objects while automatically tracking the movement of the object.

Y [ 애m ]

25
20
15
10

2. Auto-focusing system

50A characteristic quantity for determining the vertical relationshipbetween the object and the focal plane of an optical microscope is foundbased on RB data of an image around the object near the focal plane.
Accordingly, we developed a system for automatically tracking the focal
point of the microscope on the micro-object by deriving an algorithm forfocusing the object based on this condition. We configured a system thatapplies the same principle of controlling the micro hand in the direction ofheight for tracking the fingertips of the hand at the focal plane. We
achieved a tracking speed of 0.1 Hz (12 µm p-p).

-15

-10

-5

5

10

15

20

-10

25
X [ 애m ]reference position
actual position

Fig. 1 Overview of thesystem

3. Auto-handling a moving micro-object with themicro handUsing template matching, the positions of the fingers and the object in
the focal plane are automatically detected. Sufficient tracking accuracy formoving objects in the focal plane was achieved using a 60 x 60 pixel
template. We achieved auto-calibration required for accurately positioning
the micro hand by combining the auto-focusing with position detection in
the focal plane. Fig. 2 shows the absolute positioning accuracy achieved
through the calibration, which ensured within about 2 µm.
By integrating the above functions, objects could be picked up
automatically with the micro hand. Fig. 3 shows the micro hand performinga high-speed process to automatically pick up a glass particle 5 µm in
diameter.

Fig. 2 Positioning
accuracy withcalibration

Fig. 3 Automated object handling3

Activities of the Micromachine Center in Fiscal 2002
related to the field of nano-optics, and three specifictechnological areas -(1) basic nano-optics technology, (2)nanostructure building technology, and (3) nano-optics
response technology - were selected for consideration.

I. Investigation and Research on Micromachines
Research activities were aimed at towards gaining a clear
understanding of the trends in micromachine technologies andindustries and conducting investigations of and research on
new technological issues regarding the fusion of micro- andnanotechnologies, as well as making adjustments appropriate
for the multidirectional expansion of micromachine technology.

5. Research on Constructing a System for
Evaluating the Micromachine Market
With the aim of building up an economically consistent
database of micromachine-related market statistics, a
subcommittee was convened to consider issues related to thecreation of a market-estimation system; methods were chosen
and statistics compiled.

1. Investigative research for the high-efficiency
micro-chemical process technology "Microchip
Device/System Database Construction" project(recomissioned by New Energy and Industrial
Technology Development Organization [NEDO])

6. Investigation and Research on Scale Interface(commissioned activities to help promote themachine industry)

This project involved the systematic collection into acomprehensive database of information concerning hardware
design, measurement technology, and technological issues,
obtained in each process of designing, manufacturing, andevaluating microchip devices.

From the perspective of scale interface, MMC will study thetrends for optical devices in demand for next-generation opticalcommunications and evaluate the sophisticated functionality
possible by fusing micromachine technologies andnanotechnologies. To this end, an investigative committee was
set up to consider scale interface-related technologies and,within the committee, two subcommittees (looking at standards
and dimensional precision, respectively). In addition toconsidering the present situation regarding technology andtechnologies of the future, the committee prepared a report
identifying problems experienced by users, as well as issues andproblems associated with dimensional measurement.

(1) In addition to considering the data
framework and information suitable forinclusion in the database, we designed an
operational format that includes two-way
connections with databases containing
highly relevant documentary information.
(2) Basic specifications for the test database were
designed, and a software company commissioned
to create the database software.

7. Research related to simulation systems for MEMSdesign and analysis support (commissioned by the
Mechanical Social Systems Foundation)

2. Studies on the future prospects of micromachinetechnology
As we anticipate the industrialization of the micromachinetechnologies developed thus far, from a technological perspective
we must also strive toward further miniaturization in this newtechnological system of micromachines. With regard to
applications, MMC is pursuing the possibilities for the fusion of
micromachine technologies with technologies in other fields suchas medical care and biotechnology. Against this background ofgrowing demand for a multidimensional approach, MMC
established a "long-term vision subcommittee" and conducted
research related to planning directions for micromachinetechnology development and roadmaps for the main technologies.

MMC set up an investigative committee to examine issues
related to simulation systems for MEMS design and analysis
support, as well as a panel to look at related technologies.
These groups conducted surveys on such topics as existing
software, analytical tools, and basic specifications for userfriendly systems about simulation systems for MEMS design andanalysis support that can be utilized effectively by businesses(particularly foudry service enterprises) and universities - inother words, software systems to efficiently design and analyze
MEMS.

3. Studies on R & D trends for micromachinetechnology in Japan and abroad

8. Research related to technology development
strategies in the MEMS industry (commissioned
by NEDO)

MMC set up a think tank to consider trends in R&D both inJapan and abroad; conducted exploratory analysis of the latest
situation regarding the rapid expansion, both domestically andinternationally, of micromachine technology and research
trends; and built up basic technological data that contributes tothe advancement of micromachine technology.

MMC and the Nomura Research Institute were commissionedby the Ministry of Economy, Trade and Industry to jointly
prepare a draft plan for the "MEMS Project" to be launched in2003 as part of the Ministry's "Focus 21" program. In order toobtain comments from the public, MMC established a committee
to consider technology strategies and held a workshop.

4. Investigation and Research into the Applicabilityof Basic and Sprout Micromachine Technologies

II. Collection and Provision of Micromachine Information

This joint study between industry and academia is aimed at
encouraging the establishment of theories in micro and nanoscience and engineering and probing for technological seeds
necessary for promoting the merging and application of micro
and nanotechnologies. Research related to the fields of cellmanipulation and nano-optics also continued on from theprevious year.

Information and documents on micromachines inuniversities, industries, and public organizations both in Japanand overseas have been collected and combined with survey
results complied and documents produced by MMC, and madefreely available in the MMC library.

1. Maintenance and Expansion of the MMC
Library (990 publications as at March 31, 2003)(1) Research Related to Cell Manipulation
As in the previous fiscal year, technology themes suitablefor government promotion were considered and proposals for
projects prepared. As part of the decision process, a workshop
entitled "Cell Manipulation Technology for the 21st Century"
was held on February 10, 2003.

2. Publication of a Micromachine Periodical("Micromachine Index")
3. Publication of a Newsletter
4. Database Construction and Data Management
System Operations (indexed full-text retrieval)(2) Research Related to the Field of Nano-Optics
A subcommittee was established to examine research

4The results of R&D on measuring and evaluating theproperties of thin materials, conducted as part of the NEDO
Research and Development for Standards project that ended in
2001, were considered for inclusion in proposals forinternational standards.

III. Exchange and Cooperation with Worldwide
Organizations Involved with Micromachines
1. Participated in the 8th Micromachine Summit(Maastricht, the Netherlands: April 30-May 2, 2002)

2. Investigation and research on micromachine
standardization

2. Held the 8th International Micromachine/Nanotech
Symposium (Science Museum in Kitanomaru
Park, Tokyo: November 14, 2002)

The results of this research have been transmitted
worldwide, encouraging international standardization while
exercising initiative in establishing international standards.
With regard to terminology, MMC submitted a specifications
proposal to IEC/TC47 and supported deliberations through suchactions as compiling comments. With regard to measurement
and evaluation, MMC continued selecting and prioritizing items
standardization items. An international standardization
workshop was also held at the 2nd International
Standardization Forum in Tokyo in July.

3. International Exchange and Dispatch of Researchers
Norichika Fukushima, manager of the Research
Department, visited the Netherlands (Twente University) andGermany between January 30 and February 6, 2003, to examin
R&D trends in micro fluids-related fields.

4. Constructing a foundry network system
In order to further the industrialization of micromachines,
particularly MEMS, upgrading of foundry facilities is vital. To
this end, MMC established the Foundry Service Industry
Committee to organize businesses providing foundry services,
to set up a network system to improve services and to consider
ways such a system could be developed. As means ofdisseminating information, the MMC also set up its own Internet
homepage and participated in various lectures and seminars.

V. Dissemination and Education about Micromachines
1. Publication of a Public Relations Quarterly
Magazine "MICROMACHINE"
Vol. 39 to 42 were published in Japanese only.
English versions are available on
website:http://www.mmc.or.jp/

the

MMC

2. Micromachine Drawing Rally (Implemented in
2002 as a small-scale means of gathering andutilizing micromachine drawings)

5. Establishing a forum for the exchange of
micromachine technology
A workshop on micro fluids was held; lecturers were invitedfrom universities to speak on technology trends at international
conferences on micro-fluids-related topics and information andopinions exchanged.

3. The 13 t h Micromachine Exhibition (Science
Museum in Kitanomaru Park, Tokyo: November
13-15, 2002

IV. Standardization of Micromachines
4. Administration of the Federation of MicromachineTechnology

In micromachine technology and other newly establishedfields of systemized techniques as well, there is an urgent needfor the standardization of terminology, measurement, andevaluation methods. The MMC worked towords it, taking
international initiatives into perspective.

Served as secretariat for the Federation of MicromachineTechnology to link and strengthen micromachine-relatedorganizations.

5. Workshop presenting the results of grantrecipient projects for the 8th MicromachineTechnology Research Grants (FY 2000) on
September 17, 2002

1. Creation of an international standard as a method
for evaluating the properties and measuringmethods of thin film materials

An Introduction of MMC's Activities: Future Vision for Micromachines
It is certain that micromachine technology will play animportant role in a variety of social and economic fields in the 21st
century and will contribute to improving the quality of our lives.
However, today's severe socioeconomic environment does notallow us to foresee the prospects for micromachines accurately.
With the successful completion of Japan's first national
micromachine project, conducted over a ten-year period, we are now
working on new endeavors aimed at further development of
micromachine technology. One of these endeavors is to create
viable industrial applications based on results obtained through R&D
on advanced technologies.
Among other things,
Microelectromechanical Systems (MEMS) technology is increasingly
used for various applications and furthering its industrialization has
become a major objective of ours. The second endeavor is a topdown approach to the nanotechnology research that originated fromthe U.S. National Nanotechnology Initiative (NNI). Nanotechnology
is not truly useful unless it is complemented by a seamless interface
with human-sized technology, which is the role micromachinetechnology should assume.

There is no precedent for any nation having attempted toaccomplish these objectives. Given the fact that Japan remains
in structural change ten years after the economic boom ended,pursuing these objectives entails great financial risk andconsiderable effort, as well as requiring diverse expertise andknowledge of researchers in industry, government, andacademia. Therefore, a compass is needed by which we canproceed to unexplored disciplines based on the current
developments in micromachine technology.
Last year, the Micromachine Center formed a committee fordeliberating the long-term prospects of micromachinetechnology (Chairman: Prof. Isao Shimoyama, Department of
Mechano-Informatics, Graduate School of Information Scienceand Technology, The University of Tokyo). The committee hascompiled their deliberations and investigations in an interim
report entitled "A Future Vision for Micromachines."

Contents of the report:
1. Introduction: Why is a vision required now?

5

2. Prospects for micromachine technology (short-, mid-,and long-term)
3. Approaches to the development of industrial applications
4. Collaboration among industry, government, and academia(the roles of business, government, universities, and MMC)
5. Technical roadmaps in ten major fields, including a
support system to improve the quality of life for theelderly (safety, security), a bio-nanosystem, a medicalcare roadmap (applications of microtechnology andnanotechnology in the medical field), a health careroadmap, environment-related sensors, intelligent tagging(logistics system), information and telecommunications(sensor-based network), next-generation robotics, aspace-based MEMS system, and a roadmap for innovative
micromachine manufacturing technology

manufacturing know-how• Developing such infrastructures as a foundry and a design
center enabling start-up companies to design andmanufacture new devices and products immediately without
the burdens of initial investment and personnel management• Expanding the opportunities for personnel recruitment
training and developing tools to assist in design and simulation

4. Collaboration among industry, government,
and academia
While Japan's move toward global development has put its
economic and industrial structures in a transitional stage,
collaboration among industry, government, and academia is
indispensable for accomplishing new objectives. Industry
expects the government to support long-term, high-risk
research and development and to promote infrastructure.
Industry, on the other hand, must commercialize its developed
technologies. Academia is expected to create human resources
and information on basic and advanced technologies.

An outline of the interim report is given below.
2. Prospects for micromachine technology(short-, mid-, and long-term)

5. Technical roadmaps in ten major fields

Micromachines have been developed for use in a wide range
of industrial products, including sensors, moving microparts,
chemical analyzer parts, optical parts, and the like. In addition,
micromachine technology is expected to support technologicalbases in the information and telecommunications industry, thebiomedical industry, and the automobile industry. Optical
MEMS, RF-MEMS and sensors show promise for micromachineindustrialization in the short term, while there is considerable
potential for industrialization in fields based on biotechnology
or microfluid systems from a long-term perspective.

These roadmaps were developed with a focus on systems
adopting micromachine technology. The roadmaps werecreated for ten fields, while devices and element technologies
required in each field were examined based on each of theenvisioned systems. As an example, we have included aroadmap for the support system to improve the quality of life
for the elderly (5-1). Households with single and marriedelderly people account for nearly 50% of the aging society inJapan. We have examined systems and MEMS devices needed
for these systems that are primarily designed for elderly people
who do not need nursing care. An objective of these systems is
to improve the quality of life for these people by preventing
diseases and eliminating anxiety.

3. Approaches to the development of industrial
applications
The following issues must be resolved in order to progresssmoothly from the current R&D phase to a new phase in which
new devices and products are created and put into practical use.
• Meeting needs from potential technical users• Sharing intellectual properties, such as designs and

00

05

The achievements based on recommendations in thisinterim report will be published in a book around this fall.

10

6

15

20

Members' Profiles

Matsushita Electric Works,
Ltd.
1. Endeavors in Micromachine Technology
Since its establishment in 1981, the Semiconductor
Technology Development Center of Matsushita
Electric Works has worked on developing andaccumulating knowledge on semiconductor device
related technologies such as semiconductor relay
devices designed for use at our company. Beginningfrom the mid-90s, we shifted our developmentemphasis to MEMS and began in earnest to develop
technologies for MEMS devices, such as pressure
sensors and accelerometers, in order to enhance thesilicon wafer processing technology we had developed
thus far. Making maximum use of our infrastructure atthat point, we began providing a service to develop
trial products for users in-house and launched a MEMS
foundry service in January 2002. Our foundry service
covers everything from device trial manufacturing tomass-production.

Hiroshi Kikuchi
Senior Managing Director in Charge of Technology

precision micromachining possible through Deep-RIE
etching that can achieve a high aspect ratio andmachining using SOI wafers, a technology in which ourcompany specializes.
In addition to wafer machining processes forforming MEMS, our company has the technicalknowledge of such processes as packaging design,
silicon/glass anodic bonding, low-stress wafer dicing,die bonding, and wire bonding and performs a wide
variety of services in the foundry service. We also
possess a 3D circuit processing technology called
MIPTEC (microscopic integrated processing
technology) for forming microcircuits in paokage.

2. Development of Micromachine Technology
Matsushita Electric Works has already marketedpressure sensors and accelerometers manufactured
through bulk micromachining and has produced a total of
fifteen million sensors to date. In addition to these sensor
devices, we have developed microrelays, microvalves, andother actuator elements that have been well received byacademic societies overseas, for example.
We have also enhanced our machining technology
to support this production and have made high-Accelerometer

Microrelay

Microvalve

High-aspect machining

3. Future Endeavors
We see the applications for MEMS expanding into
numerous markets. MEMS are expected to have not
only automobiles, as they have in the past, but also awide variety of applications in mobile communications
such as cellular telephones, robots, entertainment,
security, environment, energy control, health andmedical equipment, and the like.
We have ranked MEMS as the most importantdevice of the future and will contribute to thedevelopment of not only our own products, but also
the entire MEMS industry, by developing large MEMS
projects through our foundry.

MIPTEC (microscopic integrated processing technology)

7Worldwide R&D

Kitamori Laboratory, University of Tokyo; Micro ChemistryGroup, Kanagawa Academy of Science and Technology; et al.
The Kitamori Laboratory has conducted research on integratingchemical and biotechnological systems on microchips on the basis ofapplied spectroscopy techniques. The research is broadly divided
into four categories: extremely basic research on chemical reactions
and the behavior of fluids in microspaces and nanospaces, basic
technology research necessary for integrating chemical andbiotechnological systems on microchips, applied research on thepractical use of integrated microchemical systems, andcommercialization research on problems to be overcome forpractical use of microchip-integrated devices.
Of these four categories, the basic research has been conductedat the initiative of the Kitamori Laboratory and the basic technology
research at the initiative of the Micro Chemistry Group in the
Kanagawa Academy of Science and Technology (KAST). The appliedresearch has been advanced as a joint research project with privatecompanies. The Institute of Microchemical Technology (IMT), which
we started as a venture company, is responsible for commercialization
research. The New Energy and Industrial Technology Development
Organization (NEDO) also takes part in some areas of appliedresearch and commercialization research. Our group cooperates withall aspects of the research and development. There are no definedboundaries separating the four categories of research, allowing us towork flexibly according to the research topic. Incidentally, the Micro
Chemistry Group became a permanent laboratory to succeed the fiveyear "Integrated Chemistry Project" that was successfully completed
in March. Our research is organized around these four researchgroups, in which some fifty researchers-about twenty students, sevenpermanent researchers including professors, seven postdoctoral
fellows, several technical assistants, IMT employees, and researchers
from private companies-are engaged.
Experiments and simulations conducted in the basic research
surprised researchers by shedding light on unrevealed chemical
phenomena. The findings include the acceleration of chemical
reactions (enzyme reactions, etc.), the formation of vortex
structures near the two-phase (liquid-liquid) flow interface
regardless of low Reynolds number flows, and the appearance ofdisordered flow at the interface. In addition, it was found that water
approaches the properties of ice at normal temperatures in amesospace, which is slightly larger than a nanospace.
The basic technology research provided us with a new methodology
for integrating normal macrochemical processes on microchips, thereby
nearly completing the first step aimed at establishing the principle for"what to do and how to do it." Now, we have begun the second step inwhich more complicated systems, such as a 3D system and the system
consists of liquid and gas phase, are integrated on microchips.
The applied research enabled us to develop a microanalysis
device system. With conventional analysis systems, we had difficulty
analyzing disease markers and environmental pollutants because of
the highly skilled techniques required. However, the new
microanalysis device reduced the analysis time to several tens ofseconds instead of half a day, demonstrating superior performanceand effectiveness on actual samples. For the field ofchemosynthesis, we also developed an innovative chemosynthesis
device capable of reducing reaction time and processing time,
improving efficiency and yield, and controlling an intermediate
reaction through instantaneous heating and cooling. Moreover, wedeveloped a new device for cell culture equipped with a lifesustaining function to supply oxygen and nutrients for a
microculture vessel created on a microchemical chip. The device
provided us with the prospect of developing a device for use in timeconsuming experiments and assays on cells and microorganisms.
In the commercialization research, we developed a massproduction system of microchemical chips, a microchip reader
equipped with highly sensitive sensors and microsystems for
performing diagnoses and health checks and monitoring theenvironment and are close to completing the prototypes. With thechemosynthesis plant, a gel manufacturing plant the size of a smallbuilding was scaled down to the size of shoe cupboard. Despite thedownsizing, the gel manufacturing plant has a production capacity ofthirty tons per year, which exceeds that of a large-scale plant. The
world's first microchemical plant has entered pilot operations
through our joint research partner Tosoh Corporation.
IMT, a university-launched venture company, offers standard
and custom-made microchemical chips and thermal lensmicroscopes capable of highly sensitive sensing and serves to restoreand disseminate university research findings by providing researchmaterials, enabling inexperienced researchers and engineers toengage in research quickly and easily.
Since there are no foreseeable commercial markets for originaltechnologies, small-scale companies are expected to pioneer thedevelopment of new technologies and establish a foundation for creating a
new market before major companies can enter. Hence, it is not an
exaggeration to say that a process resulting in the creation of a new
industry from a university-developed original technology is more an
experiment than a pragmatic approach. We work to develop an industry,
government, and academia relationship in which universities; enterprises;
the Ministry of Economy, Trade and Industry; the Ministry of Education,
Culture, Sports, Science and Technology; the Ministry of Agriculture,
Forestry and Fisheries; NEDO; the Japan Science and Technology
Corporation (JST); the Japan Society for the Promotion of Science(JSPS); and others continue to provide us with considerable support.
We couldn't produce microchannels and microstructures on a
microchemical chip smaller than a micron with microfabrication
technique. However, we started a new study aimed at constructing ananoscale infrastructure in a micron-size space in order to develop
chemical and biotechnological devices superior in functions andintegration capability. The research is based on a concept called a "Nano
Bio-Physico-Chemical Architecture". We are looking for a breakthroughin chemical and biotechnological fields through the development of new
nanotechnologies, such as nanoscale structures and chemical patterning,
reaction and fluid control systems actively applying interface and surface
properties, and cell control based on these nanostructures.

MICROMACHINE No. 44
MICROMACHINE is published quarterly by Micromachine Center (MMC) to promote the international exchange of
information related to micromachines, R&D and other technical topics, and is circulated free of change. Please send
your comments about MICROMACHINE to the publisher :Takayuki Hirano, Executive Director, Micromachine Center (MMC)
MBR99 Bldg., 6F., 67 Kanda Sakumagashi, Chiyoda-ku, Tokyo 101-0026, Japan
Tel : +81-3-5835-1870, Fax : +81-3-5835-1873
Internet Home Page h t t p : / / w w w . m m c . o r . j p /Date of Issue : August 20, 2003

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