Cover Page

O

P

E

R

A

T

I

N

G

®

M

A

N

U

Transpector MPH
Gas Analysis System
PN 074-555-P1C

ALTrademarks
The trademarks of the products mentioned in this manual are held by the companies that
produce them.
INFICON®, Transpector® and FabGuard® are registered trademarks of INFICON GmbH.
IBM® is a registered trademark of International Business Machines, Inc.
All other brand names, product names or trademarks belong to their respective holders.

Software Copyrights
This product contains embedded software protected under the following copyrights:
Copyright INFICON Inc.

Disclaimer
The information contained in this Operating Manual is believed to be accurate andreliable. However, INFICON assumes no responsibility for its use and shall not be liable
for any special, incidental, or consequential damages related to the use of this product.
Due to our continuing program of product improvements, specifications are subject tochange without notice.

Copyright©2016 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.

Declaration Of Conformity
Page 1

Warranty

WarrantyStandard INFICON One Year
Page 1WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products
manufactured by it, or by an affiliated company and sold by it, and described on
the reverse hereof, to be, for the period of warranty coverage specified below, freefrom defects of materials or workmanship under normal proper use and service.
The period of warranty coverage is specified for the respective products in therespective Seller instruction manuals for those products but shall not be less thanone (1) year from the date of shipment thereof by Seller. Seller's liability under thiswarranty is limited to such of the above products or parts thereof as are returned,
transportation prepaid, to Seller's plant, not later than thirty (30) days after the
expiration of the period of warranty coverage in respect thereof and are found bySeller's examination to have failed to function properly because of defective
workmanship or materials and not because of improper installation or misuse andis limited to, at Seller's election, either (a) repairing and returning the product orpart thereof, or (b) furnishing a replacement product or part thereof, transportation
prepaid by Seller in either case. In the event Buyer discovers or learns that a
product does not conform to warranty, Buyer shall immediately notify Seller inwriting of such non-conformity, specifying in reasonable detail the nature of suchnon-conformity. If Seller is not provided with such written notification, Seller shallnot be liable for any further damages which could have been avoided if Seller had
been provided with immediate written notification.
THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHERWARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR
OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S
EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLDHEREUNDER. All other obligations and liabilities of Seller, whether in contract or
tort (including negligence) or otherwise, are expressly EXCLUDED. In no event
shall Seller be liable for any costs, expenses or damages, whether direct orindirect, special, incidental, consequential, or other, on any claim of any defective
product, in excess of the price paid by Buyer for the product plus returntransportation charges prepaid.
No warranty is made by Seller of any Seller product which has been installed,
used or operated contrary to Seller's written instruction manual or which has been
subjected to misuse, negligence or accident or has been repaired or altered byanyone other than Seller or which has been used in a manner or for a purpose forwhich the Seller product was not designed nor against any defects due to plans or
instructions supplied to Seller by or for Buyer.
This manual is intended for private use by INFICON® Inc. and its customers.
Contact INFICON before reproducing its contents.
NOTE: These instructions do not provide for every contingency that may arise inconnection with the installation, operation or maintenance of this equipment.
Should you require further assistance, please contact INFICON.

www.inficon.com

re achus@inficon.com

Transpector MPH Operating Manual

Table Of Contents
Trademarks
Software Copyrights
Disclaimer
Copyright
Declaration Of Conformity
Warranty

Chapter 1
Getting Started
1.1
1.2
1.2.1
1.2.2
1.3
1.3.1
1.4
1.5
1.6
1.7
1.8
1.9
1.9.1
1.9.2
1.9.3
1.9.4
1.9.5
1.10
1.10.1
1.10.2
1.10.3
1.11
1.12
1.13
1.13.1
1.13.2Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
Using This Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
Note and Hint Paragraphs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
Warning and Caution Paragraphs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
How To Contact Customer Support . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
Returning Your Transpector MPH to INFICON . . . . . . . . . . . . . . . . . . . . . . 1-3
Quick Start . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
Purpose of the Transpector MPH Gas Analysis System . . . . . . . . . . . . . . . 1-4
General Description of the Transpector MPH
Gas Analysis System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Specifications for the Transpector MPH Gas Analysis System . . . . . . . . . . 1-5
Supplied Items . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Physical Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
Physical Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
Mounting Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
Ventilation Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
Maintenance Access . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
Electrical Power Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
Required Supply Voltage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
Current Rating . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
Electrical Connection . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
Overvoltage Category. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
Required Vacuum. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
Environmental Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
Use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
Altitude Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8

TOC - 1

Transpector MPH Operating Manual

1.13.3
1.13.41.13.5
1.14
1.15
1.16
1.16.1
1.16.1.1

Pollution Degree. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
Operating Temperature . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
Humidity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
Computer System Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
Software Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
Hardware Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
Sensor Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
ConFlat Flanges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10

1.16.1.1.1

Assembling ConFlat Flanges . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10

1.16.1.2

Attaching the Sensor to the Vacuum Chamber . . . . . . . . . . . . . . . . . . . . . 1-11

1.16.2
1.16.3
1.16.41.17
1.17.1
1.17.2
1.17.3
1.18
1.18.1
1.18.2
1.18.3
1.19
1.19.1
1.19.2
1.19.3
1.20

Electronics Module Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
Installing Ethernet Communications. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15
Connecting the 24 V(dc) Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15
Installing the Pirani Interlock (Optional) . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-16
Installing the Pirani Gauge on to the Extension Flange . . . . . . . . . . . . . . . 1-17
Installing the Extension Flange and Sensor onto the Vacuum System . . . 1-17
Connecting the Pirani Interlock Cable . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-18
Installing the HPR Calibration Reference (Optional) . . . . . . . . . . . . . . . . . 1-19
Installing the Calibration Reference on to the Extension Flange . . . . . . . . 1-20
Installing the Extension Flange, Sensor, and Electronics Module . . . . . . . 1-22
Connecting the HPR Valve Control Cable . . . . . . . . . . . . . . . . . . . . . . . . . 1-22
Input/Output (I/O) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-23
Two Digital Inputs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-23
One Status Relay Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-23
One Analog Input . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-25
Installing the Heater Jacket Mount Kit (Optional) . . . . . . . . . . . . . . . . . . . . 1-25

Chapter 2
Connecting Transpector MPH
2.1
2.2
2.2.1
2.2.2
2.3
2.3.1
2.3.1.1

Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
General Networking Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
IP Addresses . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
Subnetworking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
Transpector MPH IP Address. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
Changing Transpector MPH IP Address . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
Using the INFICON Mass Spectrometer Search Utility to Change the
IP Address . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4

2.3.1.1.1

IMSSU Capabilities . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5

2.3.1.2

Changing the Computer IP Address. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7

2.3.1.2.1

Windows 7 Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7

TOC - 2

Transpector MPH Operating Manual

2.3.1.2.2

Windows XP Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11

2.4
2.4.1
2.4.1.1

Connecting Transpector MPH . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-14
Connecting a Single Transpector MPH . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-14
Single Transpector MPH Direct Connection Installation. . . . . . . . . . . . . . . 2-14

2.4.1.2

Installing a Single Transpector MPH on an Existing Local Network. . . . . . 2-14

2.4.2
2.4.2.1

Installing Multiple Transpector MPH Sensors. . . . . . . . . . . . . . . . . . . . . . . 2-15
Installing Multiple Transpector MPH Directly to a Host Computer . . . . . . . 2-15

2.4.2.2

Installing Multiple Transpector MPH on an Existing Local Network . . . . . . 2-15

Chapter 3
How The Instrument Works
3.1
3.2
3.3
3.3.1
3.3.1.1

Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
The Ion Source . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
Choosing the Proper Filament . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5
Yttria-Coated Iridium Filaments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5

3.3.1.2

Tungsten Filaments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5

3.4
3.4.1
3.4.2
3.5
3.5.1
3.5.2
3.5.3

The Quadrupole Mass Filter . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
Scanning Characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
The Zero Blast . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-9
The Ion Detector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
The Faraday Cup Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-10
The Electron Multiplier (EM) Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-11
The Continuous Dynode Electron Multiplier/Faraday Cup Detector. . . . . . 3-12

Chapter 4
Applications Guide
4.1
4.1.1
4.1.1.1

How to Interpret the Result. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
Qualitative Interpretation of Mass Spectra . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
Ionization Process . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2

4.1.1.2

Isotope Ratios. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

4.1.1.3

Electron Energy Effects . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5

4.1.1.4

A Qualitative Interpretation Guide . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6

4.1.2
4.1.3
4.1.3.1

Quantitative Interpretation of Mass Spectra(Calculating Partial Pressures) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
Additional Information for Interpreting Mass Spectra . . . . . . . . . . . . . . . . . 4-14
Ion Source Characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-14

4.1.3.2

Scanning Characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-15

4.1.3.3

Fragmentation Factors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-16

TOC - 3

Transpector MPH Operating Manual

Chapter 5
Using Transpector Web UI
5.1
5.1.1
5.2
5.2.1
5.2.2
5.3
5.3.1
5.3.2
5.4
5.4.1
5.4.2
5.4.3
5.4.4
5.4.5
5.4.6
5.4.7
5.5
5.5.1
5.5.2
5.5.2.1

Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
What is Transpector Web UI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
System Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
Using Transpector Web UI on Computers . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
Using Transpector Web UI on Mobile Devices. . . . . . . . . . . . . . . . . . . . . . . 5-2
Connecting to Transpector Web UI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-3
Connecting to Transpector Web UI with Default Factory IP address . . . . . . 5-3
Connecting to Transpector Web UI with a User-Defined IP Address. . . . . . 5-5
Navigating Transpector Web UI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5
STATUS . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-5
MONITOR . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7
LEAKCHECK . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7
DIAGNOSTICS. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8
TUNE . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9
HELP . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9
PRINT. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-9
Using Transpector Web UI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-10
Transpector Web UI and FabGuard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-10
Standalone Transpector Web UI Operation . . . . . . . . . . . . . . . . . . . . . . . . 5-11
Data Acquisition . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11

5.5.2.1.1

Editable Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11

5.5.2.1.2

How To Change Scan Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-12

5.5.2.2

Leak Checking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-14

5.5.2.2.1

Leak Check Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-15

5.5.2.2.2

Using the Leak Check Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-17

5.5.2.3

Tune Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-17

5.5.2.3.1

Tune Mode Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-18

5.5.2.3.2

Default Tune Mode Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-21

5.5.2.3.3

Tuning Transpector MPH . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-22

5.5.2.4

Changing the Transpector MPH IP Address and Port Number . . . . . . . . . 5-23

5.5.2.4.1

Manually Changing the IP address . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-24

5.5.2.4.2

Using DHCP to Allow the Network to Assign an IP address . . . . . . . . . . . 5-25

5.5.2.4.3

Changing the Port Number of Transpector MPH . . . . . . . . . . . . . . . . . . . . 5-25

5.5.2.4.4

Changing the Subnet Mask of Transpector MPH. . . . . . . . . . . . . . . . . . . . 5-26

5.5.2.4.5

Changing the Gateway of Transpector MPH . . . . . . . . . . . . . . . . . . . . . . . 5-26

5.5.2.5

Changing the Sensor ID and Description . . . . . . . . . . . . . . . . . . . . . . . . . . 5-26

5.6

Transpector Web UI Best Known Methods . . . . . . . . . . . . . . . . . . . . . . . . 5-27

TOC - 4

Transpector MPH Operating Manual

5.6.1
5.6.1.1

When to Use Transpector Web UI . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-27
Vacuum Diagnostics. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-27

5.6.1.2

Leak Checking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-27

5.6.1.3

Remote Monitoring . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-27

5.6.2
5.6.3
5.6.4
5.6.4.1

Generating Shortcuts for Quick Access . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-28
Creating Bookmarks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-30
Using Wi-Fi . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-31
Why Use Wi-Fi? . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-31

5.7

Troubleshooting . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-31

Chapter 6
Maintenance
6.1
6.2
6.2.1
6.2.2
6.2.3
6.3
6.4
6.4.1
6.4.2
6.5
6.5.1
6.5.1.1

Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1
Safety Considerations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1
Toxic Material . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1
Radiation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1
Electrical Voltages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2
General Instructions For All Repair Procedures . . . . . . . . . . . . . . . . . . . . . . 6-2
Maintenance Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3
Bakeout of Quadrupole. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3
Spare Heating Jacket Part Numbers . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3
Repair Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4
Tools Required . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4
Tools for Replacing the Filament Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4

6.5.1.2

Tools for Replacing the Ion Source . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4

6.5.1.3

Tools for Replacing the Electron Multiplier . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4

6.5.2
6.5.3
6.5.4
6.5.5
6.6
6.6.1
6.6.1.1

How to Determine if a Filament Kit Replacement is Required . . . . . . . . . . . 6-5
Filament Kit Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6
Ion Source Removal . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-9
Electron Multiplier Replacement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-11
Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-15
Mass Alignment . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-15
Factory Tuning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-15

6.6.1.2

Selecting Tune Masses . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-16

6.6.1.2.1

Selecting Masses for Tuning with a
CPM Test Mixture Calibration Reference . . . . . . . . . . . . . . . . . . . . . . . . . . 6-16

6.6.1.2.2

Selecting Masses for Tuning with an
Argon Standard Calibration Reference. . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-17

6.6.1.2.3

Selecting Masses for Tuning with a User-Supplied Test Mix . . . . . . . . . . . 6-17

6.6.1.2.4

Selecting Masses for Tuning with Process Gases . . . . . . . . . . . . . . . . . . . 6-17

TOC - 5

Transpector MPH Operating Manual

6.6.1.2.5

Tuning with Background Gases . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-18

Chapter 7
Diagnosing Problems
7.1
7.2
7.3

Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-1
Symptom-Cause-Remedy Chart . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-1
Communication Problems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-6

Chapter 8
Bibliography
Chapter 9
Glossary
Chapter 10
Transpector MPH Accessories and Spare Parts
10.1
10.2
10.3
10.3.1
10.3.210.3.310.3.4Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-1
MPH Accessories . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-1
Transpector MPH Spare Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-2
Preventative Maintenance Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-2
Replacement Spare Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-2
Spare Transpector MPH Electronics Boxes . . . . . . . . . . . . . . . . . . . . . . . . 10-3
Spare Transpector MPH Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-3

Chapter 11
Specifications
11.1
11.2
11.3
11.4
11.5
11.6
11.7
11.8
11.9
11.10
11.11
11.12
11.13
11.14
11.15
11.16

TOC - 6Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-1
Sensor Length (Vacuum Side) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-1
Mass Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-1
Detector Type. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-1
Resolution . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-2
Temperature Coefficient. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-2
Sensitivity . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-2
Minimum Detectable Partial Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-2
Zero Blast Interference at Mass 2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-2
Maximum Operating Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-3
Maximum Sensor Operating Temperature . . . . . . . . . . . . . . . . . . . . . . . . . 11-3
Maximum Bakeout Temperature . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-3
Operating Temperature . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-3
Power Input . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-3
Ethernet Communication Interface. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-4
Relay Outputs. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-4

Transpector MPH Operating Manual

11.17
11.18

Inputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-4
Indicators (Green). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 11-4

Chapter 12
Supplied Items
12.1
12.1.112.1.212.1.312.1.412.1.512.1.612.1.712.1.812.1.912.1.10Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-1
Ship Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-1
Electronics Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-2
Power Supply . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-2
Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-2
Extension Kit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-3
Software . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-4
Heating Jacket System (Optional) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-4
Calibration Reference (Optional) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-4
Interlock Kit (Optional) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-4
Angle Valve (Optional) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 12-5

Index

TOC - 7

Transpector MPH Operating Manual

Chapter 1
Getting Started
1.1 Introduction
The Transpector ® MPH Gas Analysis System is a quadrupole-based mass
spectrometer Residual Gas Analysis (RGA) instrument designed for use in highvacuum environments for monitoring trace contaminants and process gases.
Transpector MPH runs with the Windows® operating system using either amember of the FabGuard® suite of programs or the Transpector Web UI onboard
web server.
This chapter provides an overview of the Transpector MPH Gas Analysis System.
Topics include: the purpose of Transpector MPH, its specifications, a list of
supplied items, installation instructions and customer support contact information.
Software information can be found either in the FabGuard Explorer operating
manual (PN 074-528) or in the FabGuard help files (for all other FabGuard
programs). Instructions for use of the Transpector Web UI are provided in
Chapter 5.

1-1

Transpector MPH Operating Manual

1.2 Using This Manual
Please read this Operating Manual before operating Transpector MPH.

1.2.1 Note and Hint Paragraphs
NOTE: This is a note paragraph. Notes provide additional information about thecurrent topic.
HINT: This is a hint paragraph. Hints provide insight into product usage.

1.2.2 Warning and Caution Paragraphs
The following Caution and Warning paragraphs are used to alert the reader ofactions which may cause either damage to the instrument or bodily injury.

CAUTION
This is an example of a Caution paragraph. It cautions
against actions which may cause an instrument
malfunction or the loss of data.

WARNING
This is an example of a General Warning paragraph. It
warns against actions which may cause bodily injury.

WARNING - Risk Of Electric ShockThis is an example of a Electrical Warning paragraph. It
warns of the presence of electrical voltages which may
cause bodily injury.

1-2

Transpector MPH Operating Manual

1.3 How To Contact Customer Support
Worldwide customer support information is available under Contact >> Support
Worldwide at www.inficon.com:
Sales and Customer ServiceTechnical Support

Repair Service

If you are experiencing a problem with Transpector MPH, please have thefollowing information readily available:

the Transpector MPH serial numbera description of the problem

an explanation of any corrective action already attemptedthe exact wording of any error messages

1.3.1 Returning Your Transpector MPH to INFICON
Do not return any component of Transpector MPH to INFICON before speaking
with a Customer Support Representative and obtaining a Return Material
Authorization (RMA) number. Transpector MPH will not be serviced without an
RMA number.
Prior to being given an RMA number, a Declaration Of Contamination (DOC) form
may need to be completed if the sensor has been exposed to process materials.
DOC forms must be approved by INFICON before an RMA number is issued.
INFICON may require that the sensor be sent to a designated decontamination
facility, not to the factory.

1-3

Transpector MPH Operating Manual

1.4 Quick Start
Read this operating manual in full prior to operating Transpector MPH. Then, follow
the steps below to quickly start using Transpector MPH.

1 Ensure that all supplied items have been received. See Chapter 12,
Supplied Items.

2 Install the hardware. See section 1.16, Hardware Installation, on page 1-9.
3 Install the communication cable. See section 1.16.3, Installing Ethernet
Communications, on page 1-15.

4 Install the software. Refer to the FabGuard Explorer Operating Manual for
information on installing the software.
NOTE: Transpector MPH requires FabGuard version 8.4.2 or higher for operation.

1.5 Purpose of the Transpector MPH Gas Analysis System
The Transpector MPH Gas Analysis System identifies and performs a quantitative
analysis of residual gas species present inside a vacuum system. The sensor, aquadrupole mass spectrometer, analyzes gases by:ionizing some of the gas moleculesseparating the ions by their mass-to-charge ratiomeasuring the quantity of ions at each mass

The ions exit the quadrupole at their specific mass-to-charge ratio and generate asignal at the detector which allows for qualitative identification of the gas species
in the vacuum chamber. The magnitudes of these signals are proportional to thequantity of the respective gases present inside the vacuum system.
Transpector MPH is an important aid for detecting leaks and contaminants inhigh-vacuum systems. Transpector MPH can also indicate the abundance ofprocess specific gases present within a vacuum or other vessel, and be used toinvestigate a process at a molecular level or monitor process conditions.

1-4

Transpector MPH Operating Manual

1.6 General Description of the Transpector MPH
Gas Analysis System
The Transpector MPH Gas Analysis System is comprised of three parts:
Sensor
The sensor functions only in a high-vacuum environment with pressures below
5 x 10-4 Torr (6.7 x 10-4 mbar) [6.7 x 10-2 Pascals].
The sensor itself is comprised of three components:

the ion source (ionizer)the quadrupole mass filter

the ion detector

The sensor is mounted on an electrical feedthrough flange, which is bolted to
the vacuum space where the gas analysis measurements are made.
Electronics Module
The electronics module controls the sensor and communicates to the operating
computer. The electronics module and sensor are sold in sets.
The electronics module attaches to and is supported by the sensor.
Software
The software controls the electronics module and displays the datafrom the sensor.

1.7 Specifications for the Transpector MPH Gas Analysis System
See Chapter 11 for the Transpector MPH Gas Analysis System specifications.

1.8 Supplied Items
See Chapter 12 for items that are packaged with a Transpector MPH
Gas Analysis System.

1-5

Transpector MPH Operating Manual

1.9 Physical Requirements
The following sections show the physical dimensions, weight, mounting
requirements, ventilation requirements, and the perimeter required formaintenance access for Transpector MPH.

1.9.1 Physical Dimensions
Figure 1-1 shows the overall physical dimensions for Transpector MPH.
Figure 1-1 Physical dimensions
(C)
(B)

(A)

169.9 mm (6.69 in.)115.1 mm (4.53 in.)121.7 mm
(4.79 in.)Transpector MPH

(A)

(B)

(C)

MPH100F, MPH200F,
MPH300F

143 mm
(5.63 in.)

50 mm
(1.98 in.)365.7 mm
(14.40 in.)

MPH100M, MPH200M,
MPH300M

199 mm
(7.83 in.)

50 mm
(1.98 in.)

421.6 mm
(16.60 in.)

1.9.2 Weight
The Transpector MPH electronics module weighs 1.53 kg (3 lb. 6 oz.). The
Transpector MPH systems total weight depends on which sensors are used.

1-6

Transpector MPH Operating Manual

1.9.3 Mounting Requirements
The sensor is mounted to a high-vacuum chamber with a 69.9 mm (2.75 in.) DN40
ConFlat® flange with an extension tube with an OD of 41.2 mm (1.62 in.) and an IDof 38.1 mm (1.5 in.).
The electronics module attaches to and is supported by the sensor.
Transpector MPH can be mounted in any position.

1.9.4 Ventilation Requirements
At least 25.4 mm (1 in.) of open space around the Transpector MPH electronics
module must be maintained for proper ventilation.

1.9.5 Maintenance Access
Easy access to Transpector MPH should be maintained for installation andmaintenance activities.

1.10 Electrical Power Requirements
Transpector MPH must be connected to a source of power as specified in thefollowing sections.

1.10.1 Required Supply Voltage
20 to 30 V(dc), 24 V(dc) typical

1.10.2 Current Rating
1.25 A maximum

1.10.3 Electrical Connection
Latching, 4-pin DIN connector, internally isolated from system ground.
See Figure 1-2.
Figure 1-2 Transpector MPH connections

Electrical Connection

1-7

Transpector MPH Operating Manual

1.11 Overvoltage Category
Overvoltage Category II (per EN61010-1)

1.12 Required Vacuum<5 x 10-4 Torr (6.7 x 10-4 mbar) [6.7x 10-2 Pascals]

1.13 Environmental Requirements
The following paragraphs explain the use, altitude range, humidity, pollution
degree, and operating temperature for Transpector MPH.

1.13.1 UseTranspector MPH is designed for indoor use only.

1.13.2 Altitude Range
Transpector MPH can be used up to a maximum altitude range of2000 m (6561 ft.).

1.13.3 Pollution Degree
Pollution Degree 2 (per EN61010-1)

1.13.4 Operating Temperature
Transpector MPH is designed to operate within a temperature range of
5°C to 50°C (41°F to 122°F).

1.13.5 Humidity
Transpector MPH is designed to operate in an environment with up to
98% relative humidity.

1.14 Computer System Requirements
Refer to the FabGuard Explorer Operating Manual (PN 074-528) for computer
system requirements.

1.15 Software Installation
Refer to the FabGuard Explorer Operating Manual (PN 074-528) for information on
installing the software and setting up the protocols necessary to ensure proper
software operation.

1-8

Transpector MPH Operating Manual

1.16 Hardware Installation
Three pieces of hardware must be installed in the following order:

1 Install the sensor as explained in section 1.16.1 on page 1-9.
2 Install the electronics module as instructed in section 1.16.2 on page 1-14.
3 Install the communications cables from the computer to the electronics module
as explained in section 1.16.3 on page 1-15.
If the optional extension tube heater was purchased with Transpector MPH, seesection 1.20, Installing the Heater Jacket Mount Kit (Optional), on page 1-25 for
installation instructions.
If the optional Pirani Interlock was purchased with Transpector MPH, see section
1.17, Installing the Pirani Interlock (Optional), on page 1-16 for installation
instructions.
If the optional HPR Calibration Reference was purchased with Transpector MPH,
see section 1.18, Installing the HPR Calibration Reference (Optional), on page
1-19 for installation instructions.

1.16.1 Sensor Installation
CAUTION
Do not touch any surface on the vacuum side of thesensor with bare fingers. If it is necessary to touch any ofthese parts, always wear clean linen, nylon, powder freelatex or vinyl laboratory gloves.
Before installing the sensor on your system, check forany signs of loose or broken parts.
Do not attempt to clean the sensor in any kind of solvent.
Cleaning the sensor requires its disassembly. If thesensor is contaminated and needs cleaning, contact
INFICON.

1-9

Transpector MPH Operating Manual

1.16.1.1 ConFlat Flanges
The sensor is installed on a vacuum system with a 2.75 in. DN40 ConFlat flange.
ConFlat flanges, and similar compatible types made by other manufacturers, areused for attaching devices to ports on high vacuum systems. If there are noconcerns with the installation of this type of flange, proceed to section 1.16.1.2,
Attaching the Sensor to the Vacuum Chamber, on page 1-11.
NOTE: If the system does not have a port with a compatible mating flange, an
adapter will be necessary.
To install these flanges without leaks, follow proper operating procedures. Theseflanges are sealed with a metal gasket and can be heated for bakeout totemperatures of up to 300°C. For bakeout temperatures when a sensor is installed,
see Table 1-1 on page 1-13.
1.16.1.1.1 Assembling ConFlat Flanges
To assemble a pair of ConFlat flanges:

1 Wipe the sealing areas of the flanges with a laboratory towel using a clean
solvent, such as water free alcohol. These areas must be clean and free ofparticulate matter.

CAUTION
Do not touch the gasket and flange faces with yourfingers during the installation process.

2 Install the copper gasket between the two flanges. (See Figure 1-3.) Always
use a new gasket. Do not attempt to use gaskets more than once.
Figure 1-3 Gasket and flange assembly

FlangeCopper Gasket

Flange1 - 10Transpector MPH Operating Manual

3 Bring the two flanges together making sure that the gasket fits in the recess inboth flanges. Flange faces should be parallel. If the gasket is properly seated, itshould not be possible to slide the two flanges laterally with respect to each other.

4 Install supplied silver-coated stainless steel bolts in the bolt holes of the flanges
and finger-tighten.
NOTE: If the factory-supplied silver-coated stainless steel hardware is not
used and the flanges are going to be baked, coat the bolt threads withan anti-seize compound (FelPro® C 100 or equivalent).

CAUTION
Do not get any of the anti-seize compound on the gaskets
or vacuum parts of the flange.

5 After the bolts have been finger-tightened and the flange faces are parallel,tighten the bolts gradually and evenly in a star pattern until the flange faces arebrought into even contact with each other.
1.16.1.2 Attaching the Sensor to the Vacuum Chamber
The sensor may be mounted in any position when attaching it to the vacuum vesselor chamber.

CAUTION
Avoid mounting the sensor near any magnetic fields
greater than two gauss.
It is important that the connection between the sensor
and the vacuum chamber does not interfere with gas
exchange to ensure that the gas composition accuratelyreflects that existing in the vacuum chamber.
If materials are evaporated or coatings are deposited in
the vacuum chamber, the sensor must be protectedagainst the deposition of these materials on its surfaces
by installing a baffle or deflector.
In systems which are baked, include the sensor in the
bakeout zone or provide it with separate heaters.

1 - 11

Transpector MPH Operating Manual

Dimensions of the quadrupole sensors are shown in Figure 1-4.
Figure 1-4 Sensor dimensions

249.1 mm
(9.81 in.)

193 mm
(7.83 in.)
MPH100M, MPH200M, MPH300M
198.9 mm
(7.61 in.)

143 mm
(5.63 in.)
MPH100F, MPH200F, MPH300F

The sensor is shipped inside an extension tube with 38.1 mm (1.5 in.) ID. This tube
is provided to attach the sensor to your vacuum chamber. The part number for the203.2 mm (8 in.) long extension tube kit is 961-206-G2.

CAUTION
The silver-plated bolts used for mounting the sensor to
the vacuum system must be oriented such that the bolt
heads are on the same side of the sensor as theelectronics box. Otherwise, there may be interference
between the black INFICON Transpector mounting nut
and sensor mounting hardware.

1 - 12

Transpector MPH Operating Manual

CAUTION
Maximum bakeout temperature for sensors is shown in
Table 1-1.
Table 1-1 Sensor maximum bakeout temperature

Maximum
OperatingTemperature

Maximum Bakeout
Temperature
Electronics Removed

MPH100F/200F/300F

200°C

300°C

MPH100M/200M/300M

150°C

300°C

SensorCAUTION
The Transpector MPH electronics module must be
removed prior to bakeout at temperatures greater than200°C (FC).
Do not turn on the Electron Multiplier (EM) at sensor
temperatures above 150°C. Turning on the EM at elevatedtemperature could result in permanent damage to thedetector.

WARNING
During or immediately after bakeout, the heating jacket
and metal surfaces in the vicinity of the heating jacket
may be extremely hot. These surfaces may exceed 100°C
at the maximum ambient operating temperature (50°C),
which will cause burns if touched directly without using
the proper personal protection equipment.

1 - 13

Transpector MPH Operating Manual

1.16.2 Electronics Module Installation
The Transpector MPH electronics module must be mounted in an area where theambient temperature does not exceed 50°C and there is free air circulation aroundthe electronics module. Best performance will be achieved if the electronics
module is not located close to major heat sources where it is subjected to wide
temperature variations. For Electronics module dimensions, see section Figure 1-5
on page 1-14.
After the sensor has been installed on the vacuum system, the Transpector MPH
electronics module must be mounted on the sensor:

1 The Transpector MPH sensor mounting connector assembly includes amounting nut and an O-ring. When the mounting nut is tightened, the O-ring
compresses making a tight fit on the sensor housing. For proper installation,
place the nut over the end of the sensor and roll the O-ring back to the grooveon the sensor.

2 Note the recessed area on the sensor feedthrough and the ground tab on
Transpector MPH electronics module. Match the recessed area of the
feedthrough to the ground tab and carefully slide the Transpector MPH
electronics module onto the sensor. Ensure the Transpector MPH electronics
module slides on fully.

3 Hand tighten the mounting nut on the Transpector MPH sensor.
4 Continue to section 1.16.3 and install the communications cable.
Figure 1-5 Electronics module dimensions

121.67 mm(4.79 in.)60.32 mm
(2.375 in.)57.48 mm(2.263 in.)
114.96 mm
4.526 in.

1 - 14

Transpector MPH Operating Manual

1.16.3 Installing Ethernet Communications
Communication cables are required to connect Transpector MPH to the computer.
Ethernet communication is the default communication method forTranspector MPH. Communication cables are required to connect Ethernet
communication uses standard RJ45, Cat5e Ethernet cables. To use Ethernet
communications, attach the supplied Cat5e Ethernet cable to the LAN port on theback of the Transpector MPH electronics module. (See Figure 1-6.)
For networking information, see Chapter 2, Connecting Transpector MPH.
Figure 1-6 Ethernet port

Ethernet Port

1.16.4 Connecting the 24 V(dc) Power Supply
1 Connect the +24 V (dc) power supply cable to the 24V connector on theTranspector MPH electronics module by sliding back the latch, installing thecable, and then releasing the latch.
NOTE: The latch locks the connector to the electronics module, and must be
slid back to detach the cable from the Transpector MPH electronics
module.

2 Plug the AC line cord into the mating IEC320 connector on the power supply
module.
NOTE: The AC Line Input for the +24 V(dc) Power Supply must be rated:
90-260 V(ac), 40 W maximum, 47-63 Hz.

3 Plug the AC line cord into an appropriate AC outlet.
4 Verify that the green power indicator on the Transpector MPH back panel isilluminated. If the green indicator is not illuminated, check the power
connections.

1 - 15

Transpector MPH Operating Manual

1.17 Installing the Pirani Interlock (Optional)
Transpector MPH has an optional Pirani Interlock. Transpector MPH with the Pirani
Interlock kit adds the following parts to all standard Transpector MPH shipped
items (see Figure 1-7):(1) Special extension flange with a 4-VCR fitting (and installed sensor)(2) INFICON PSG500 Pirani Gauge(3) 4-VCR male-to-male right-angle connection(4) VCR gaskets(5) Interlock cable(6) Washer(7) Nut plate(8) Silver coated stainless steel bolt
(9) Copper gasket CF40
Figure 1-7 Pirani interlock parts

1
5

6
7
9

8 3
2
4

1 - 16

Transpector MPH Operating Manual

1.17.1 Installing the Pirani Gauge on to the Extension Flange
1 Insert the VCR gasket into the 4-VCR female ports on both the Pirani gauge
and the flange.

2 Connect one end of the 4-VCR male-to-male adapter to the 4-VCR female portof the extension flange following standard VCR protocols.

3 Connect the 4-VCR Female Pirani gauge connection to the other side of the
4-VCR male-to-male right-angle adapter.

4 Ensure that the Pirani is aligned parallel with the extension tube with theconnection end pointed towards the electronics module.

5 The resulting assembly will look like Figure 1-8.
Figure 1-8 Connecting the Pirani to the flange

1.17.2 Installing the Extension Flange and Sensor onto the Vacuum System
Installation instructions for the extension flange, sensor and electronics module are
identical to the instructions for a standard Transpector MPH. Refer to Hardware
Installation on page 1-9.

1 - 17

Transpector MPH Operating Manual

1.17.3 Connecting the Pirani Interlock Cable
The Pirani gauge is fully powered by the Transpector MPH Auxilliary I/Oconnection. Install the RJ-45 connection of the interlock cable into the gauge andconnect the 15-pin D-Sub connection to the Auxilliary I/O port of Transpector MPH.
See Figure 1-9.
Figure 1-9 Assembled interlock

1 - 18Transpector MPH Operating Manual

1.18 Installing the HPR Calibration Reference (Optional)
Transpector MPH has an optional calibration reference, with a choice of argon ora standard gas mixture (selected impurities in argon). This calibration reference
provides:a means to tune the RGA

a reference for adjusting the EM voltage

a reference for tracking the performance of the RGA

A Transpector MPH with the HPR calibration reference adds the following parts tothe standard Transpector MPH shipped items: (see Figure 1-10):(1) Special extension flange with a 4-VCR fitting (and installed sensor)(2) Calibration reference(3) VCR gaskets(4) HPR valve control cable and solenoid(5) Calibration reference mounting bracket(6) Gas connections and hose
Figure 1-10 HPR calibration reference parts

2

1

3

5

6

4

1 - 19Transpector MPH Operating Manual

1.18.1 Installing the Calibration Reference on to the Extension Flange
1 Install the VCR gasket into the female port of the extension flange.
2 Connect the 4-VCR male connection of the calibration reference to the 4-VCR
female connection of the extension flange. See Figure 1-11.

3 Tighten the connection following standard VCR gasket protocols: finger-tighten
the connection, then tighten it 1/8 to 1/4 turn by wrenches.
Figure 1-11 HPR VCR connection

4 Screw the 1/4 in. and 1/8 in. gas line connections into the solenoid.
See Figure 1-12.
Figure 1-12 Gas connections

1/8 in. Connection

1/4 in. Connection

1 - 20Transpector MPH Operating Manual

5 Connect the supplied 1/8 in. nylon hose into the 1/8 in. connection of thesolenoid.

6 Connect the other end of the 1/8 in. nylon hose into the 1/8 in. gas connectionof the HPR valve. See Figure 1-13.
Figure 1-13 Valve gas connection

7 Insert the end of the calibration reference into the circular hole of the mounting
bracket. See Figure 1-14.
Figure 1-14 Calibration reference bracket connection

8 Connect the compressed air required for valve operation into the
1/4 in. connection of the solenoid.

1 - 21

Transpector MPH Operating Manual

9 The fully assembled HPR flange is shown in Figure 1-15.
Figure 1-15 Fully assembled HPR flange

1.18.2 Installing the Extension Flange, Sensor, and Electronics Module
The extension flange and sensor are installed as usual, except one of the bolts thatconnect the sensor to the extension flange must go through the HPR mounting
bracket. Refer to Hardware Installation, section 1.16 on page 1-9.

1.18.3 Connecting the HPR Valve Control Cable
The HPR solenoid is powered by the Transpector MPH Auxilliary I/O connection.
Connect the 15-Pin D-Sub connection to the Aux I/O port of the Transpector MPH
electronics module.

1 - 22

Transpector MPH Operating Manual

1.19 Input/Output (I/O)
This section describes the input and output (I/O) for Transpector MPH.
The Transpector MPH electronics module supports the following I/O functions
through the AUX I/O connector located on the back panel. See Figure 1-16.

1.19.1 Two Digital Inputs
Logic Inputs 1 and 2 are by default set to remotely control emission status.
Connecting Pin 14 (Logic Input 1) to Pin 15 (Ground) will turn on the emission.
Connecting Pin 13 (Logic Input 2) to Pin 15 will turn off the emission. See Table 1-2.
Table 1-2 Digital inputs

Emission ON

PIN 14Emission OFF

PIN 13GND

PIN 15

CAUTION
Controlling emission through the digital inputs bypasses
all software or hardware interlocks. When using digital
inputs for controlling Transpector MPH emission,develop an interlock that will not allow the emission toturn on if the pressure is too high for operation ofTranspector MPH.

1.19.2 One Status Relay Output
One status relay output is active (closed) when the emission is on.
See Table 1-3.
Table 1-3 Status relay output

EMISSION ON

Relay closed. PIN 2 and PIN 1connected

EMISSION OFF

Relay open

CONTACT RATING

24 V(dc) at 0.5 A

NOTE: The status relay is not available when the HPR or calibration reference
options are selected.

1 - 23

Figure 1-16 Pinout connectors

Transpector MPH Operating Manual

1 - 24

Transpector MPH Operating Manual

1.19.3 One Analog Input
One analog input is differential and can handle inputs between 0 to +10 volts andcommon mode voltages of 100 volts. See Table 1-4.
Table 1-4 Analog inputs

ANALOG INPUT 1

(+)

PIN 9

ANALOG INPUT 1(-)

PIN 10

NOTE: The analog input is supported through FabGuard software.

1.20 Installing the Heater Jacket Mount Kit (Optional)
The Transpector MPH Heater Jacket Mount Kit (961-433-G1) provided with
Heating Jacket Kit (961-029) is intended to inhibit the movement of the Manifold
Heater. This kit is only for system installations without calibration standards that are
mounted in a vertical orientation. (See Figure 1-17.)
NOTE: For all other heater installations, discard this kit.

1 Install the Manifold Heater over the tube extension and align the snaps with thetapped hole in the sensor flange.

2 Align the Internal Heater Bracket so the large hole fits over the snap on theheating jacket and capture the bracket in the Manifold Heater by securing thesnaps.

3 Using a 7 mm combination wrench, attach the Internal Heater Bracket to thetapped hole in the sensor flange using the hex head fastener provided in the kit.

4 Attach the manifold heater power connector to the mating connector on the
600-1487 power cable and 068-0433 (120V) or 068-0434 (230V) AC power
cord provided in the 961-029 heating jacket kit.

1 - 25

Transpector MPH Operating Manual

Figure 1-17 Heater jacket mount kit installation

Internal Heater Bracket
provided in kit 961-433-G1
Sensor Flange
Snap in Manifold Heater
Transpector MPH

Hex head fastenerprovided in kit 961-433-G1

Manifold Heater 961-416-P1
provided in kit 961-029

1 - 26

Transpector MPH Operating Manual

Chapter 2
Connecting Transpector MPH
2.1 Introduction
Transpector MPH uses Ethernet as its default communications method.
Transpector MPH has an IP address and a MAC address.
IP addresses are used as a means of identifying individual devices on a network.
IP addresses are unique on a network but not universally, that is, meaning that only
one device on a network can have a specific IP address but two devices on
separate networks can have the same IP address.
MAC addresses are another identifier that are unique for each device. MAC
addresses are never duplicated. FabGuard uses IP addresses to locate andidentify sensors on a network.

2.2 General Networking Information
This section will discuss some of the general networking variables that can affectthe connection of Transpector MPH.

2.2.1 IP Addresses
IP addresses can be set either manually or automatically:Static (manual) IP addresses are set by the user and are manually changeable
by the user

Dynamic (automatic) IP addresses are automatically set by a Host

INFICON recommends using Static IP addresses for Transpector MPH but allows
for Dynamic IP addresses set through DHCP (Dynamic Host Communication
Protocol).
NOTE: When using Static IP addresses, a block of addresses should be reservedfor Static use and prohibited from being assigned by the DHCP server(Host). This will avoid duplicate IP address conflicts from occurring.

2-1

Transpector MPH Operating Manual

CAUTION
Since FabGuard® uses the IP address to identify eachconnected Transpector MPH, the IP address must notchange during operation of Transpector MPH.
Using DHCP, the host may generate a new IP address
every time Transpector MPH is taken offline and thenreturns online.
DHCP may also change the IP address automatically ifthere is an IP address conflict on the network.
If the Transpector MPH IP address is randomly changed
during data acquisition, FabGuard will not automaticallyreconnect to the Transpector MPH sensor because it
does not know the newly assigned IP address. This willlead to loss of communication and loss of data.
Static IP addresses do not change unless the IP address
is manually changed. Static IP addresses help protect
Transpector MPH from losing communication and data.
Transpector MPH uses IPv4 IP addresses. IPv4 IP addresses consist of 32 bitsthat are traditionally displayed in dot-decimal notation which consists of fourdecimal numbers each ranging from 0 to 255 separated by dots. An example of an
IP address in dot-decimal notation would be 192.168.1.100. Each part represents
an octet. Normally, the IP address consists of a Network Prefix and a Host Protocol.

2-2Transpector MPH Operating Manual

2.2.2 Subnetworking
A subnetwork (or subnet) is a logically visible subdivision of an IP (Internet
Protocol) network. Splitting an IP network into multiple subnets is referred to as
subnetting. Subnetting sets the region of the IP address that will be used as a
Network Prefix for all IP addresses inside of a subnet. This is accomplishedthrough a subnet mask. Different types of subnet masks and their implications to
IP addresses are shown in Table 2-1.
Table 2-1 Subnetting

Example 1

Example 2

Example 3

IP address

192.168.1.104

192.168.1.105

192.168.1.150

Subnet mask

255.255.255.0

255.255.0.0

255.255.255.192

Network prefix

192.168.1.0

192.168.0.0

192.168.1.128

Host Protocol

0.0.0.104

0.0.1.105

0.0.0.22

As seen in Table 2-1, the subnet masks determine which octets of the IP address
are used as the network prefix.
In order for two network devices to communicate, they must be on the same
subnet. This means that they must not only be connected to the same internet
network, but must also have the same network prefix. If two devices have twodifferent network prefixes, this means that the two devices are on different subnets.

2.3 Transpector MPH IP Address
By default, Transpector MPH ships with an IP address of 192.168.1.100 with asubnet mask of 255.255.0.0.
NOTE: When connecting Transpector MPH to an existing local network, there
must be a static IP address for each Transpector MPH being installed.
Contact the network administrator for IP address assignments.

2.3.1 Changing Transpector MPH IP Address
There are two different methods of changing the Transpector MPH IP address.
The first method utilizes the onboard Transpector Web UI to change theIP address. Instructions for changing the IP address via Transpector Web UI canbe found in section 5.5.2.4 on page 5-23.
Alternatively, the IP address can be changed through a standalone.exe as
discussed next in section 2.3.1.1.

2-3

Transpector MPH Operating Manual

2.3.1.1 Using the INFICON Mass Spectrometer Search Utility to Change the IP Address
The alternative method of changing the Transpector MPH IP address employs the
INFICON Mass Spectrometer Search Utility (IMSSU), a standalone executablefound on the software installation disk and the RGA Manuals CD that ships witheach Transpector MPH. To use the IMSSU, locate and double-click
INFICONMassSpecSearch.exe. The program does not need to be installed towork. Upon double-clicking, the IMSSU will display as shown in Figure 2-1.
Figure 2-1 INFICON Mass Spectrometer Search Utility

When the IMSSU first opens, nothing will be displayed. The IMSSU detects all
Transpector MPH installed on the network regardless of IP address. The IMSSU
will start automatically, or it can be manually started by clicking Search (Clears
List). The IMSSU will then display the:

Genus (which will display MPH for Transpector MPH sensors)Transpector MPH Serial NumberCurrent IP address of Transpector MPH



MAC address of Transpector MPH

DHCP status of Transpector MPH (On or Off)Description (which is user editable)

2-4

Transpector MPH Operating Manual

2.3.1.1.1 IMSSU Capabilities
The IMSSU has multiple built-in functions. All of these functions are available byright-clicking on the sensor inside of the IMSSU. The right-click menu can be seenin Figure 2-2, and the different functions are described in the following sections.
Figure 2-2 IMSSU right-click menu

Changing Transpector MPH IP Address
To change the IP address, right-click on the sensor and selectChange IP Address. The TCP/IP Properties window will display, see Figure 2-3.
Figure 2-3 IMSSU TCP/IP Properties window

The TCP/IP Properties window will display:Transpector MPH MAC Addressthe current Transpector MPH IP addressa Change To text box, to enter the new Transpector MPH IP addressa selection of either DHCP On or DHCP Off

To change the IP address, type the new IP address in the Change To box and click
Apply. Transpector MPH will automatically reboot and will return online with the
new IP address.
Alternatively, the IP address can be automatically assigned to Transpector MPH byselecting DHCP On (this is not recommended).
Launching Transpector Web UITranspector Web UI can be launched from inside of the IMSSU. More information
about Transpector Web UI can be found in Chapter 5, Using Transpector Web UI.

2-5

Transpector MPH Operating Manual

Find Device
Find Device On will flash the power LED so that the device can be located. The
LED will flash for up to 60 seconds and then return to the fully On state.
Find Device Off will stop the flashing if executed within 60 seconds of turning theFind Device On.
Show Settings
Click Show Settings to open a display on the right-side of the IMSSU that will
display multiple settings of Transpector MPH. This is an excellent tool fortroubleshooting. The following settings are displayed:Serial Number

Gateway

IP Address



DHCP Status

MAC AddressDescriptionSubnet Mask



Name



DescriptionStructure Version



Name



Box Type



Port



Firmware Version



TCP/IP Source

2-6

Transpector MPH Operating Manual

2.3.1.2 Changing the Computer IP Address
An alternative to changing the Transpector MPH IP address is to change the hostcomputer’s IP address to allow for communication between the host computer andTranspector MPH. To change the computer’s IP address, follow these instructions:2.3.1.2.1 Windows 7 Instructions
NOTE: Changing the IP address of the host computer requires administrator
rights. You will need to use an administrator account to change theIP address.

1 Click Start to display the Start menu, then click Control Panel. Start is locatedon the taskbar on the Windows 7 desktop. See Figure 2-4.
Figure 2-4 Start menu

2 In the Network and Internet group. click View network status and tasks.
See Figure 2-5.
Figure 2-5 View network status and tasks

2-7

Transpector MPH Operating Manual

3 On the network status and tasks window, click Change adapter settings.
Figure 2-6 Change adapter settings

4 If the host computer is connected to Transpector MPH through the Ethernet
port of the computer, right-click Local Area Connection and selectProperties. See Figure 2-7.
Figure 2-7 Changing adapter settings

2-8

Transpector MPH Operating Manual

5 Select Internet Protocol Version 4 (TCP/IPv4), then click Properties.
See Figure 2-8.
Figure 2-8 TCP/IPv4

6 In the TCP/IPv4 properties menu, select Use the following IP address.
See Figure 2-9.
Figure 2-9 Use the following IP address

2-9

Transpector MPH Operating Manual

7 In IP address: type 192.168.1.XXX. The last octet can be any number as longas it is unique to the network. See Figure 2-10.

8 In Subnet mask: type 255.255.0.0.
9 Click OK.
Figure 2-10 Changing the computer IP address

10 The IP address will now be set to the manual IP address chosen in step 7.
Exit all of the menus and then connect to Transpector MPH.

11 To change the IP address back to its default settings, follow steps 1 through 6
and return the IPv4 properties to their original settings.

2 - 10Transpector MPH Operating Manual

2.3.1.2.2 Windows XP Instructions

1 Click Start to display the Start menu, then click Control Panel. Start is locatedon the taskbar on the Windows XP desktop. See Figure 2-11.
Figure 2-11 XP Start Menu

2 On the Control Panel, click Network and Internet Connections.
See Figure 2-12.
Figure 2-12 XP Control Panel2 - 11

Transpector MPH Operating Manual

3 In the Network and Internet Connections window, click Network
Connections. See Figure 2-13.
Figure 2-13 Network and Internet Connections

4 Double-click the Local Area Connection icon. See Figure 2-14.
NOTE: The icon may have a number after it if more than one connection has
been installed. Make sure to choose the correct Local Area
Connection.
Figure 2-14 Network Connections

2 - 12

Transpector MPH Operating Manual

5 Click Properties. See Figure 2-15.
Figure 2-15 Local Area Connection Status

6 Select Internet Protocol (TCP/IP), then click Properties.
Figure 2-16 Local Area Connection Properties

7 Select Use the Following IP Address and enter in the desired IP address.
Then click OK. The IP address will update.
Figure 2-17 TCP/IP Properties

2 - 13

Transpector MPH Operating Manual

2.4 Connecting Transpector MPH
Before connecting Transpector MPH, decide:

1 Is Transpector MPH going to be set up on:a private network (installed directly on to either a computer or a router thatis not hooked up to the internet), oran internal network where multiple computers are connected with access tothe internet?

2 Is more than one Transpector MPH sensor being installed at the same time?

2.4.1 Connecting a Single Transpector MPH
2.4.1.1 Single Transpector MPH Direct Connection Installation
When installing a single Transpector MPH on a private network or directly
connected to a computer, changing the IP address of Transpector MPH is only
necessary if the computer being used to connect to Transpector MPH has adifferent network prefix than Transpector MPH.
The network prefix of Transpector MPH is 192.168.x.x. The IP address of the hostcomputer used to control Transpector MPH must have a subnet mask of
255.255.0.0 and a network prefix of 192.168.x.x.
If this is not the case, change the computer IP address to match the network prefixof Transpector MPH. For example, giving the computer an IP address of
192.168.1.101 will allow Transpector MPH to communicate directly with thecomputer. Refer to section 2.3.1.2, Changing the Computer IP Address, on page
2-7.
2.4.1.2 Installing a Single Transpector MPH on an Existing Local Network
When installing a single Transpector MPH on an existing local network, the default
IP address of Transpector MPH may not be compatible with the network.
Transpector MPH can have either a Static IP address (recommended) or a
Dynamic IP address set by DHCP (not recommended).
Contact your network administrator for information regarding valid IP addresses
and have them assign an IP address for Transpector MPH. See section 2.3.1,
Changing Transpector MPH IP Address, on page 2-3.

2 - 14

Transpector MPH Operating Manual

2.4.2 Installing Multiple Transpector MPH Sensors
Since each Transpector MPH is shipped with the same default IP address, theIP address of each Transpector MPH must be changed one at a time so that eachsensor has a unique IP address. See section 2.3.1, Changing Transpector MPH
IP Address, on page 2-3.

CAUTION
Do not connect multiple Transpector MPH to a network at
the same time without first changing the IP addresses.
Since the IP addresses are not unique, connecting
multiple units at the same time will cause IP address
conflicts on the network.

2.4.2.1 Installing Multiple Transpector MPH Directly to a Host Computer
If multiple Transpector MPH sensors are to be connected to a single host computerand not to an existing local area network, a private local network must be created.
Transpector MPH will have to be installed on either a router or Ethernet switch. The
router or switch is then connected to the host computer through the LAN port of therouter/switch.
2.4.2.2 Installing Multiple Transpector MPH on an Existing Local Network
If multiple Transpector MPH sensors are to be connected to an existing local
network, use an Ethernet switch instead of a router.
NOTE: Routers can cause conflicts with local networks because the router willattempt to set IP addresses for all network connected devices.
Since Transpector MPH sensors will be network connected devices, each sensor
must have an IP address assigned to it by a network administrator. After changing
each IP address manually, connect all of the sensors to the Ethernet switch andconnect the switch to the local network.

2 - 15

Transpector MPH Operating Manual

Chapter 3
How The Instrument Works
3.1 Introduction
This section explains how Transpector MPH produces measurements. For a
discussion of how to interpret these measurements, see Chapter 4, Applications
Guide.

3.2 Overview
Transpector MPH Gas Analysis System is a quadrupole based Residual Gas
Analyzer which analyzes the presence and relative abundance of gases in a
mixture. Transpector MPH Gas Analysis System consists of three parts:
a sensor, which functions only in a high-vacuum environment

an electronics module, which operates the sensor

software, which resides on an external computer and controls theelectronics module

NOTE: A high-vacuum environment correlates to pressures below
6.7 x 10-2 Pascals, or approximately 5 x 10-4 Torr [approx. 6.7 x 10-4 mbar].
By attaching the sensor to a small vacuum system with a suitable controlled leakor other gas-inlet device, Transpector MPH Gas Analysis System can measuregases or volatile materials at pressures higher than those at which the sensor itself
can operate.
The Transpector MPH sensor analyzes gases by:ionizing some of the gas molecules (in the ion source)

separating the ions by their mass-to-charge ratio (m/z) (in the quadrupole massfilter)

measuring the quantity of ions at each mass (in the detector)

The masses and their fragmentation patterns, unique for each substance, can beused to identify the gas molecules from which the ions were created. The
magnitudes of these signals are used to determine the relative abundance of therespective gases.

3-1

Transpector MPH Operating Manual

The sensor consists of three main parts: (See Figure 3-1.)


ion source (ionizer)

quadrupole mass filter

ion detector

These parts are mounted on an electrical feedthrough flange, bolted to the vacuum
space where the gas analysis measurements are made.
Figure 3-1 Transpector MPH sensor

Ion Source

Quadrupole

Detector

The sensor works only in a high-vacuum environment because the ions, once
created, must not collide with neutral gas species or the walls of the ion source.
Otherwise, they cannot be detected. At low pressure, the total flight path of the ionsis long enough to pass through the quadrupole without collisions.

3.3 The Ion Source
The ion source of Transpector MPH is optimized for detecting residual gases in a
vacuum system. The sensor has an open construction that facilitates the flow ofgas species into the ionization region. Figure 3-2 on page 3-3 shows the open ion
source in more detail.
Inside the ion source, a large current is put through a filament. This current heats
the filament and causes it to emit electrons, which collide with the gas species
forming ions. Once a gas specie is ionized, electric fields can be used tomanipulate it.
The ions formed in the ion source result from the loss of electrons and thus are
positive in charge.

3-2

Transpector MPH Operating Manual

Figure 3-2 Sensor’s ion source

Electron Repeller
Filament (Cathode)
Anode (with Cage)
Focus Lens
Source Exit Lens

3-3

Transpector MPH Operating Manual

Transpector MPH offers two different types of filaments:


Dual Yttria-coated Iridium filamentDual Tungsten filament (option)

Emission current refers to the stream of electrons emitted by the filament. The
filament is heated with a DC current from the emission regulator circuit, with theresulting temperature of the filament used as the means of controlling the emission
current.
Centered inside the curved filament is the ion cage, which is mounted to the anodeplate. The cage has an open mesh structure to facilitate the flow of gas molecules
into the ionizing region. The potential (voltage) on the anode is positive with respect
to the electron repeller (also an open mesh structure); the potential on the filament
lies somewhere between these other two electrodes. The potential difference
between the filament and the anode determines the kinetic energy (usually called
the electron energy) of the emitted electrons. The electron energy in turn
determines how gas molecules will ionize when struck by the electrons.
The ions formed within the cage on the anode are pulled away by the potential
on the focus lens and formed into a beam. (The focus lens is sometimes called
an extractor, since it extracts the ions from the region in which they are created.)
The focus lens also serves to focus the ion beam into the hole in the source exit
lens. To attract positive ions, the focus lens is biased negatively with respect tothe anode.
The potential on the source exit lens is negative with respect to the anode, and (forthe particular design illustrated here) the focus lens as well. Part of the ion beam
passes through the hole in the exit lens and is injected into the mass filter.
The remaining portion of the beam strikes the exit lens and is neutralized, resulting
in a current flow. The magnitude of this current is related to the pressure in the ion
source, and can therefore, be used as a measure of the total pressure. When thiscurrent exceeds a preset level, the voltages operating the sensor are turned off toprotect the sensor from damage due to an over-pressure condition.
NOTE: This protection feature works only after the filament has been operating
for a short period of time. Therefore, the filament will not be protectedfrom excessive pressure if the sensor is turned on too early in a
pump-down cycle.

3-4Transpector MPH Operating Manual

3.3.1 Choosing the Proper Filament
Dual Yttria-coated Iridium and the optional Dual Tungsten filaments are available
for Transpector MPH. Determining which one should be used for a specificapplication can be difficult. This section will detail the different scenarios wherein
one filament type is preferred over the other.
3.3.1.1 Yttria-Coated Iridium Filaments
Yttria-coated iridium filaments have a coating of yttrium oxide over an iridium core.
Yttria is a rare-earth element that, in its oxide form, is fully oxidized. This meansthat the surface of the yttria-coated iridium filament is inert with respect to oxygen
damage. For applications which will include exposure to oxygen, choosing theyttria-coated iridium filament is appropriate.
Yttria-coated iridium filaments do not withstand exposure to halogens. Upon
exposure to halogens, the yttria coating will form yttria-oxyhalides which will chipoff of the filament and cause direct exposure of the iridium core, shortening the
lifetime of the filament. Use tungsten filaments when an application includes
exposure to halogens (fluorine, chlorine, bromine or iodine).
3.3.1.2 Tungsten Filaments
Tungsten filaments are used for monitoring processes that utilize a large amountof halogens (such as Etch). The tungsten filament is not easily attacked byhalogens and will have a much longer lifetime than the yttria-coated iridium
filaments.
Tungsten filaments are not able to withstand environments with a large level ofwater or oxygen present (combined partial pressure of water or oxygen greaterthan 1E-6 Torr). The heated tungsten filament forms tungsten oxides which caneither coat the ion source or contaminate a process. Use yttria-coated iridium
filaments for oxygen-heavy and/or water rich applications.

3-5

Transpector MPH Operating Manual

3.4 The Quadrupole Mass Filter
The ions produced in the ion source are injected into the mass filter, which rejects
all ions except those of a specific mass-to-charge ratio. Most ions contain only one
unit of charge. In Transpector MPH, the mass filter is a quadrupole type, to which
a combination of RF and DC potentials is applied. The RF frequency and amplitude
determine the mass/charge ratio, and the RF/DC ratio determines the filter
sensitivity. (See Figure 3-3.)
Figure 3-3 The Sensor’s quadrupole mass filter

YXZ

The mass filter’s four rods are alternately charged to direct ions of specific masses
down through the center, deflecting all larger and smaller masses (hence the term
mass filter).
The mass filter consists of four parallel rods, or poles, in a square array. The rods,
and the insulators in which they are mounted, form an extremely precise
mechanical assembly. The distance between the center of the square array and theclosest rod surface is known as the quadrupole radius, with the symbol r0. If theratio of the round rod radius to r0 is made equal to 1.148, the resulting electric field
generates the maximum quadrupole field.
Opposite rods are electrically connected together. The ions are directed down thecentral axis of the assembly in a direction nominally parallel to the length of therods. There the ions are separated by their mass-to-charge ratios by the lateralforces resulting from the potentials applied to the poles.

3-6

Transpector MPH Operating Manual

The applied potentials consist of an RF component and a DC component. The RF
potential on one set of rods is out of phase by 180° with respect to the RF potential
on the other set of rods, but of the same amplitude. For one pair of rods, the “X”
pair, the DC potential is positive. For the other, the “Y” pair, the DC potential is of
the same magnitude but negative. The DC and RF potentials are referenced to acenter voltage (sometimes called the pole zero). The following equations
summarize the potentials applied to the rods:

X = V cos  2ft  + U + PZ

[1]

Y = – V cos  2ft +   – U + PZ

[2]

where, V is the RF amplitude, f is the RF frequency, t is time, U is the DC
potential, and PZ is the pole zero.
The RF component removes the low-mass ions from the beam. Ions of sufficiently
low mass have their motions remain in phase with that of the applied RF. These
ions will gain energy from the field and oscillate with increasingly large amplitudes.
Eventually, as they travel along the length of the rods, they will strike one of therods and be neutralized. On the other hand, high-mass ions are focused by the RFcomponent to an area close to the quadrupole’s long axis, the “Z” axis.
The DC component is superimposed on the RF to remove high-mass ions from thebeam. The DC field deflects the high-mass ions toward the negative poles,
opposing the focusing effects of the RF field. Eventually, these high-mass ionsstrike the negative rods and are neutralized. By a suitable choice of DC-to-RF ratio,
the mass filter can be made to discriminate against both high and low-mass ions to
the desired degree.
The kinetic energy directed along the Z axis of the mass filter (usually called the ion
energy) is primarily dependent on the difference between the potential at which theions were formed (approximately the anode voltage) and pole zero. The ion energy
is usually only slightly modified by the electric field (the fringing field) between thesource exit aperture and the quadrupole. Imbalances in the amplitude of the twophases of RF applied to the rod pairs, and of the DC voltages also applied, resultin a further modification of the ion energy.
The mass of the ions passed by the filter is determined by the RF amplitude, theRF frequency, and the quadrupole radius, as shown by the following equation:2

V = 14.438Mf r 02

[3]

where, V is the peak-to-peak RF amplitude in Volts, M the mass of the ion in
atomic mass units (AMU) per electron charge, f the RF frequency inmegahertz, and r0 the quadrupole radius in centimeters.
For example, a 200 AMU singly charged ion would pass through a quadrupole withnominal 1/4 in. diameter rods (an r0 of 0.277 cm), operating at 1.78 MHz, at apeak-to-peak RF amplitude of approximately 700 Volts.

3-7Transpector MPH Operating Manual

The mass of ions transmitted (M) is directly proportional to the RF amplitude(provided f is constant). As the RF amplitude is increased, progressively higher
mass ions will be made to oscillate in phase with the RF field and thus gain
sufficient energy to strike the poles. The DC voltage must also be increased tomaintain the high-mass rejection properties of the filter. A mass spectrum cantherefore, be obtained by sweeping the RF amplitude, along with the DC voltage.
The next section (Scanning Characteristics) discusses the variation in theefficiency of transmission of ions through the filter with mass. Following that,
section 3.4.2, The Zero Blast, on page 3-9 discusses the behavior of the filter atvery low masses where the applied voltages approach zero.

3.4.1 Scanning Characteristics
As described above, the quadrupole acts as a mass filter for a mixed beam ofions, rejecting those of both high and low mass, while passing those of anintermediate mass. The selectivity of the mass filter is expressed in terms ofresolution, R, which is numerically given by the ratio of the center mass, M, to thewidth, M (both in AMU), of the pass band. Since the number of the ions passedby the filter falls off gradually as the edge of the pass band is approached, thewidth is defined at the point where the ion current falls to some specified fraction(usually 1/2 or 1/10) of the maximum value. The width of the pass band isdetermined by the DC-to-RF ratio.
While the quadrupole drive circuits can be designed so that R varies in any desiredmanner with M, it is usually most convenient to keep M constant at a value, which
ensures adequate separation of masses that are 1 AMU apart. This mode ofscanning is called Constant M. As a result, R is proportional to M, and therefore,
the efficiency with which ions of mass M are transmitted through the quadrupole
decreases with M. Thus, the sensitivity of the sensor decreases as M increases.

3-8

Transpector MPH Operating Manual

3.4.2 The Zero Blast
When the mass filter is tuned to very low masses, the RF and DC voltages applied
to the rods approach zero. The quadrupole then ceases to act as a filter, and alarge current of unseparated ions is detected. This current is called the zero blast.
See Figure 3-4 on page 3-9.
The zero blast, present in all quadrupole-based sensors, can interfere with theobservation of masses 1 and 2 when significant quantities of higher-mass ions arepresent. In some instruments, the magnitude of the zero blast is concealed bypreventing the voltages from reaching zero. With Transpector MPH, the zero blast
only produces parts-per-million interference to masses 1 and 2.
Figure 3-4 Zero blast

Zero Blast

3-9

Transpector MPH Operating Manual

3.5 The Ion Detector
The ion detector region of the sensor consists of the quadrupole exit lens and thedetector itself. Often, the quadrupole exit aperture is biased negatively with respect
to the anode, focusing ions that have been transmitted through the quadrupole into
the detector element. The detector can be a simple Faraday Cup (FC), an Electron
Multiplier (EM), or a combination of both.

3.5.1 The Faraday Cup Detector
The Faraday Cup detector is typically a metal plate or a cup-shaped electrode, on
which the ion beam impinges. Ions strike the detector and are neutralized, thus
drawing a current from the circuitry connected to the electrode. Usually, the current
flow that results is exactly equal to the incident ion current. In Transpector MPH
instruments, the Faraday Cup is at ground potential.
The minimum sensitivity for a 100 amu Transpector MPH instrument equippedwith a simple Faraday Cup detector is typically 6 x 10-4 amps per Torr. The
detected currents can be as small as 1 x 10-15 amps for ultra-high vacuum levels.
See Figure 3-5.
Figure 3-5 Faraday Cup Detector
Signal Output
Faraday Cup
Quadrupole Exit Lens

Detector

3 - 10Transpector MPH Operating Manual

3.5.2 The Electron Multiplier (EM) Detector
The Electron Multiplier (EM) acts as an in situ preamplifier for improved sensitivity.
Although there are several different types of EM, their operating principals are thesame. Incoming ions are accelerated into the input of the EM by a high negative
voltage (usually -1.0 kV or more). When an ion strikes the surface of the EM, one
or more secondary electrons are emitted. These electrons are accelerated to asecond surface which is at a more positive potential, where additional electrons are
generated.
This process repeats itself until a pulse of electrons emerges from the output of the
EM and is collected on a Faraday Cup. The result is that as many as a million
electrons or more can be produced by each incident ion. The current from a
Faraday detector is positive (for positive ions). An EM detector current is negative.
The ratio of the electron output current to the incident ion current is known as EM
gain. The gain primarily depends on the EM type, the voltage applied to the EM
input, the voltage applied across the EM, the condition of the EM, and, to a lesser
extent, the mass and chemical nature of the incident ion. In general, EM gain
decreases as ion mass increases.
The advantage of the EM detector sensor is its high sensitivity (at least
500 amps/Torr), thus making it possible to measure partial pressures as low as
2 x 10-15 Torr for a 100 AMU Transpector MPH sensor. A typical Faraday Cup
sensor of the same mass range would have a sensitivity of only 6 x 10-4 amps/Torr,
resulting in a minimum detectable partial pressure of 3 x 10-13 Torr.

3 - 11

Transpector MPH Operating Manual

3.5.3 The Continuous Dynode Electron Multiplier/Faraday Cup Detector
The Continuous Dynode Electron Multiplier/Faraday Cup (CDEM/FC), used for the
EM containing MPH models, offers the advantages of both the FC and EM
detectors combined in one unit.
Figure 3-6 A CEM/FC Detector

Electron Collector
CEM Cone

Deflector Shield

Signal Output

In CDEM/FC detectors, the EM cone amplifies the electron pulse, significantly
increasing the analyzer’s sensitivity.
The Transpector MPH CDEM/FC detector uses a continuous dynode element
made of a special type of glass, rather than discrete dynode EMs, which are madefrom a copper-beryllium alloy. The principal advantage of the CDEM is that its
performance does not degrade when exposed to air. In order to prolong its usefullife, a copper-beryllium dynode multiplier must be stored under vacuum; exposure
to air for more than a brief period can result in a significant decrease in the
maximum available gain.
The CDEM has some disadvantages. The maximum operating temperature for the
CDEM is 150°C. (It can still be baked out at 300°C, provided that the high voltage
is off.) Also, the CDEM is slightly slower to recover after exposure to excessive
input or output currents, and it may take a bit longer to stabilize its gain after thehigh voltage is changed.
The CDEM is operated at high voltages between -0.6 and -2.0 kV. A new CDEM
will typically have a gain of between 10 and 1,000 at -0.8 kV. The gain at -3.0 kV
typically exceeds 1 x 106. Transpector MPH default EM voltage is -0.8 kV.

3 - 12

Transpector MPH Operating Manual

CAUTION
Do not operate the CDEM at temperatures above 150°C.
Permanent damage may result. Also, avoid output
currents in excess of 1 x 10-6 amps; either decrease thehigh voltage or, if possible, decrease the pressure.
Use the minimum CDEM voltage required to obtain the necessary peak amplitudes
and/or signal-to-noise ratio. Operating at higher voltages than necessary will resultin premature aging of the Electron Multiplier, requiring early replacement. As the
CDEM ages, the voltage needed to get a specific EM gain will increase.
Since EM performance depends on the condition of its interior surfaces, preventhydrocarbon or other contamination as follows:Ensure diffusion-pumped vacuum systems are properly trapped to reduce oilback-streaming.

Ensure turbomolecular pumped systems are interlocked to eliminate
mechanical pump oil back-streaming through a nonspinning turbo pump.

Electron Multiplier gain reduction from these kinds of problems can range from
50% to more than 90%. The initial gain of the EM is generally high enough toaccommodate some degradation and yet still be usable. With repeated instancesof contamination, the multiplier will eventually require replacement.
NOTE: In addition to hydrocarbon contamination, multipliers can be adversely
affected by exposure to highly reactive chemicals. Avoid any substancethat will either cause the deposition of a surface film on the EM or etch its
surface. Avoid high levels of reactive fluorides, such as tungsten
hexafluoride, hydrogen fluoride, and nitrogen trifluoride.

3 - 13

Transpector MPH Operating Manual

Chapter 4
Applications Guide
4.1 How to Interpret the Result
This chapter discusses how to interpret Transpector MPH measurements:
Section 4.1.1, Qualitative Interpretation of Mass Spectra, on page 4-1, explains
how to determine which substances are present in the gas sample being
analyzed.

Section 4.1.2, Quantitative Interpretation of Mass Spectra (Calculating Partial
Pressures), on page 4-8, shows how to estimate how much of each substanceis present.

Section 4.1.3, Additional Information for Interpreting Mass Spectra, on page
4-14, provides additional information that may help you interpret mass spectra.

FabGuard software includes routines which serve as aids in the interpretation ofspectra and the calculation of partial pressures and relative concentrations.
For a discussion of how Transpector MPH produces measurements, refer to
Chapter 3, How The Instrument Works.

4.1.1 Qualitative Interpretation of Mass Spectra
The basic graphical output of a Transpector MPH is the mass spectrum. A mass
spectrum is a plot of ion intensity as a function of ion mass-to-charge ratio. Eachchemical substance has a characteristic mass spectrum. Different instruments will
give slightly different spectra for the same substance. The particular characteristicsof the ionizer, mass filter, and detector, not to mention the manner in which thesample is introduced into the mass spectrometer, all influence the spectrum that is
produced.
Rarely will a mass spectrum be obtained for a pure substance. Most of the time(especially for residual gas analyzers), the spectrum obtained will be a compositeof the individual substances which together comprise the actual sample present.
See Figure 4-1.

4-1

Transpector MPH Operating Manual

Figure 4-1 Example mass spectrum

The bottom graph is a trend analysis showing the most importantmasses versus time. The top graph shows the data taken during thescan and shows the air spectra over a six decade y-axis. The
prominent peaks for air are mass 28 from Nitrogen, mass 32 from
Oxygen, mass 40 from Argon and mass 18 from water vapor.

4.1.1.1 Ionization Process
When a sufficiently energetic electron strikes a gas molecule, there are many
processes that can occur, just some of which are summarized in Table 4-1.
Table 4-1 Electron impact ionization processes

XYZ+ + e- 
XYZ+ + 2e-(1)

XYZ2+ + 3e-(2)

XY + Z+ + 2e-(3)

XY+ + Z + 2e-(4)

X+ + YZ + 2e-(5)

X + YZ+ + 2e-(6)

XZ + Y+ + 2e-(7)

XZ+ + Y + 2e-

(8)

4-2

Transpector MPH Operating Manual

In all cases, the reactants are a high energy electron, e-, and a gas molecule, XYZ.
The products of the first reaction are the molecule with a single electron removed(the so-called parent ion) and two low energy electrons. In the second reaction, twoelectrons are removed from the gas molecule, resulting in a doubly charged ion.
Triply (or even more highly) charged ions are also possible, provided the incident
electron has enough energy.
Reactions 3 through 8 are all examples where the original molecule is broken intofragments, at least one of which is positively charged (negative ions can also be
produced in this manner). Only the positive ion fragments are observed; the neutral(i.e., uncharged) fragments are not detected. The mass spectrum obtained when
the parent molecule breaks apart under electron impact is commonly referred to as
the fragmentation pattern (or, sometimes, the cracking pattern). For example, afragmentation pattern for Nitrogen shows 14N+ (14 AMU), 14N2+ (28 AMU), and14 15 +N N (29 AMU).
In general, peaks from multiply charged species will be less intense than those forthe corresponding singly charged ion. For example, the doubly charged peak forargon is typically less than one fifth as intense as the singly charged peak (it should
be noted that this intensity ratio is sensitive to the incident electron energy).
There are some situations when it is difficult to determine whether the ion is singly
or multiply charged. When a molecule is composed of two atoms of the sameelement, Transpector MPH has difficulty distinguishing between the singly-charged
one atom fragment ion and the doubly-charged two atom molecular ion; which willboth have the same mass-to-charge ratio. Refer to Figure 4-1; the peak at 28 AMU
is the parent ion, N2+. It is not discernible from this spectrum if the peak at 14 AMU
is from N+ or N22+. It has been demonstrated, by other means, that the 14 AMU
peak in the nitrogen spectrum is from the singly-charged fragment ion.
Most ions (with the important exception of complex hydrocarbons) have masses
very close to integer values. When the mass of an ion is not evenly divisible by the
number of charges on it, the mass-to-charge ratio will not be an integer. This meansthat an ion such as Ar3+ will appear at 13.33 AMU, while F2+ will show up
at 9.5 AMU.
4.1.1.2 Isotope Ratios
An additional cause of multiple peaks in the mass spectrum of a pure substance isthat most (but not all) elements are composed of more than one isotope. For
example, 99.63% of all nitrogen atoms have a mass of 14 AMU; only 0.37% havea mass of 15 AMU. Examine the nitrogen spectrum in Figure 4-1 on page 4-2. The
largest peak at 28 AMU is the parent ion, N2+. The peak at 29 AMU is the isotope
peak, 14N15N+, and is 0.74% (two times 0.37%) as high as the parent peak since
there are two nitrogen atoms in the ion, each one of which has a 0.37% chance ofbeing 15 AMU.

4-3

Transpector MPH Operating Manual

Some elements have many intense isotopes (e.g., xenon is 0.096% mass 124,
0.090% mass 126, 1.92% mass 128, 26.44% mass 129, 4.08% mass 130, 21.18%
mass 131, 26.89% mass 132, 10.44% mass 134, and 8.87% mass 136).
Isotope ratios, like fragmentation patterns, are a very useful aid in recognizing
specific materials. Under normal ionization conditions, the peak height ratios for thevarious isotopes of an element will be the same as the ratios of their naturalabundances. That is, the probability of ionizing, for example, the mass 35 isotopeof chlorine (35Cl) is the same as the probability of ionizing the mass 37 isotope(37Cl). Thus, the peak height ratio of mass 35 to 37 from HCl will be 3.07 to 1
(75.4% / 24.6%).
For a listing of the isotopic ratios for the lighter elements, see Table 4-2. For acomplete listing of the natural abundances for the isotopes of all the elements, see
the Handbook of Chemistry and Physics from CRC Press.
Table 4-2 Isotope ratios
Isotope Ratios
Element

Mass No.

Relative
AbundanceH1

99.985

2

0.015

He

3

0.000134~100.0

B

10

19.78

11

80.22

C

12

98.892

13

1.108

N

14

99.63

15

0.37

16

99.759170.0374180.2039

F

19

100.0

Ne

20

90.92

21

0.257

22

8.82

Na

23

100.0

Al

27

100.0

Si

28

92.27

29

4.68

30

3.05

P

31

100.0

S

32

95.06

33

0.74

O

4-4

Transpector MPH Operating Manual

Table 4-2 Isotope ratios (continued)
Isotope Ratios
Element

Cl
Ar

Mass No.

Relative
Abundance

34

4.18

36

0.016

35

75.4

37

24.6

36

0.337

38

0.063

40

99.6004.1.1.3 Electron Energy Effects
The exact fragmentation pattern observed will depend on the energy of thebombarding electrons. Figure 4-2 graphs the number of argon ions (of different
charge states) produced per incident electron per Torr of gas pressure as a functionof electron energy.
Figure 4-2 Electron energy effects

12
10

Ar +

N

8
6
Ar 2+

4

Ar 3+ x10

2
0

100

Ar 4+ x100

200
300
Electron Energy (eV)

400

500

From a paper by W. Bleakney, Physical Review, 36, p. 1303, published in 1930.

The appearance potential (i.e., the minimum electron energy required to produce
a specific ion) for Ar+ is 15.7 eV. The number of argon ions produced rises steeply
with energy until a maximum is reached at about 55 eV. As the electron energy
rises above this level, the rate of Ar+ production slowly decreases.

4-5

Transpector MPH Operating Manual

The appearance potential for Ar2+ is 43.5 eV, and the ion production rate does not
maximize until the electron energy exceeds 100 eV. The appearance potential for
Ar3+ is approximately 85 eV, while the appearance potential for Ar4+ is over 200 eV.
4.1.1.4 A Qualitative Interpretation Guide
To use Transpector MPH to identify unknown substances, three characteristics
must be recognized:
fragmentation patternsmultiply charged ionsisotope ratios

Simple spectra are, in general, relatively easy to interpret and will yield useful
identifications. The analysis of complicated mixtures of substances is much moredifficult.
Table 4-3 is intended as a spectrum interpretation guide which may be of use when
first examining an unknown spectrum. The guide lists the masses of peaks,
possible ion identities for each of these masses, and common sources for each ofthese ions.
NOTE: This list is not all-inclusive.
Table 4-3 Spectrum Interpretation Guide

Spectrum Interpretation Guide
AMU #Chemical Symbol

Sources1

Hwater F or hydrogen F2

H 2, Dhydrogen, deuterium (2H)

3

HD, 3Hhydrogen-deuterium, tritium (3H)

4He

helium5

No known elements

6

C

doubly ionized 12C (Rare)7

N

DI 14N (Rare)8O

DI 16O (Rare)9

No known elements

10

Ne, 10B

DI 20Ne (Rare), BF3, BCl3

11

Ne, 11B

DI 22Ne (Rare), 11BF3, BCl3

12Ccarbon, carbon monoxide F, carbon dioxide F

13

CH, 13C

methane F, carbon isotope

14

N, CH2

nitrogen, methane F or Note 1

4-6

Transpector MPH Operating Manual

Table 4-3 Spectrum Interpretation Guide (continued)

Spectrum Interpretation Guide
AMU #Chemical Symbol

Sources15

CH3methane F or Note 1

16

O, CH4, NH2

oxygen or carbon monoxide F, ammonia

17

OH, NH3

water F, ammonia F

18

H 2O

water

19

F

fluorine or freon F

20Ar2+, Ne, HF

argon Dl, neon, hydrofluoric acid22

neon, DI CO2

21
22

Ne, CO2

23

4-7

24

C2

See Note 1

25

C 2H

See Note 1

26

C2H2 CN

See Note 1, hydrogen cyanide F

27

C2H3, Al, HCN

See Note 1, aluminum, hydrogen cyanide

28

N2, CO, C2H4, Si

nitrogen, carbon monoxide, ethylene P, silicon

29

CH3CH2ethane F or ethanol F or isopropyl alcohol

30

C2H6, NOethane P, nitric oxide

31

P, CH2OH,

oxygen, methanol F,

32

O2, S

oxygen, sulfur, methanol P

33

HShydrogen sulfide F

34

H2S, 34S, O2hydrogen sulfide P, sulfur isotope,
oxygen isotope

35

Cl

chlorine isotope, See Note 2

36HCl, 36Ar, C3hydrochloric acid, argon isotope, hydrocarbons

37

37

chlorine isotope, See Note 2, hydrocarbons

38

37HCl, C H
3 2hydrochloric acid or See Note 2, hydrocarbons

39

C 3H 3

See Note 3, hydrocarbons

40

Ar, C3H4

Argon, See Note 1, hydrocarbons

41

C 3H 5

See Note 1, hydrocarbons

42

C 3H 6

See Note 1, hydrocarbons

Cl, C3H

Transpector MPH Operating Manual

Table 4-3 Spectrum Interpretation Guide (continued)

Spectrum Interpretation Guide
AMU #Chemical Symbol

Sources43

C3H7, CH3CO

Note 1, acetone F or methyl ethyl ketone F

44

CO2, C3H8

carbon dioxide, See Note 3

45

CH3CH2O

ethanol F or Isopropyl alcohol F

46

CH3CH2OH

ethanol P

47

C35Cl

See Note 2

48

HC35Cl, SO

See Note 2, sulfur dioxide F

49

C37Cl

See Note 2

50

C37Cl, CF2, C4H2

See Note 2, freon F, Note 3

NOTES: (1) Fragments of several hydrocarbons, such as mechanical pump oil, diffusion
pump oil, vacuum grease, cutting oil, and organic solvents.
(2) Fragments of several chlorinated hydrocarbons, such as carbon tetrachloride,tichloroethylene, and many freons.
(3) Fragments from both straight chain hydrocarbons and benzene ringhydrocarbons.
(4) F = Fragment ion; P = Parent ion; DI = Doubly ionized

4.1.2 Quantitative Interpretation of Mass Spectra(Calculating Partial Pressures)
Partial pressure is defined as the pressure of a designated component in a gas
mixture. By Dalton’s Law, the sum of all the partial pressures is the total pressure.
Transpector MPH is designed so that the height of a peak in a mass spectrum is
proportional to the number of ions giving rise to that peak. Also by design, thenumber of ions is more or less proportional to the partial pressure of the substancegiving rise to that peak (over some specified operating pressure range). Therefore,
the height of a peak is proportional to the partial pressure of the substance giving
rise to that peak.
The following equation shows the relationship between the partial pressure of
substance determined by measuring the ion current at mass b:

PP a = K ab  I ab

[1]

The partial pressure of substance a is symbolized by PPa, while Kab is the
proportionality constant for the peak at mass b from substance a, and Iab is the ion
current at mass b from substance a.

4-8

Transpector MPH Operating Manual

The proportionality constant, Kab, depends on the nature of the substance being
detected and on the characteristics of Transpector MPH. The substancedependent part is called the material factor, Mab. The instrument dependent part iscalled the analyzer factor, Ab, and depends primarily on the ion mass, b. Therefore,
the original equation [1] can therefore, be rewritten as follows:

PP a =  M ab  A b   I ab

[2]

The material factor, Mab, depends on the fragmentation pattern for the particular
substance, the fragmentation pattern for a reference gas (usually nitrogen), and theease with which the substance can be ionized relative to the same reference gas.
The relationship involved is shown in equation [3]:1
M ab = ----------------------------FF ab  XF a

[3]

FFab is the fragmentation factor for substance a at mass b. It is equal to the fractionof the total current of all ions from substance a which have a mass b. XFa is theionization probability of substance a, relative to nitrogen (i.e., XFN =1). That is, it is
the ratio of total ion current (for all masses) from substance a to the total ion current
from nitrogen, both measured at the same true partial pressure. Both fragmentation
factors and ionization probabilities depend strongly on the energy of the ionizing
electrons. If the correct values of these factors are not known for the exact
conditions of the particular analyzer being used, they can be approximated using
published values for other conditions with, generally, only a small loss in accuracy.
Fragmentation factors can be calculated from fragmentation patterns given in thegeneral references cited in Chapter 8. Other valuable references include the Indexof Mass Spectral Data from ASTM, EPA/NIH Mass Spectral Data Base by Heller
and Milne, and an extensive library of spectra available from the National Instituteof Standards and Technology.
Table 4-4 lists the fragmentation factors (FF) for the major peaks for selected
substances.
NOTE: Actual fragmentation factors vary significantly depending especially on theionizer, electron energy, and mass filter turning. For best accuracy,
measure fragmentation factors with the same instrument used for the
analysis, under the same tuning conditions

4-9

Transpector MPH Operating Manual.

Table 4-4 Typical fragmentation factors for the major peaks of some common substances

Mass

FF

acetone (CH3)2CO

Mass

FF

helium He

43

0.63

4

58

0.23

42

0.04

hydrogen H2

27

0.03

2

Mass

FF

oxygen O2
1.00

1.00

argon Ar

32

0.95

16

0.05

toulene C2H5CH3
91

0.46

92

0.34

60

0.07

65

0.05

40

0.83

krypton Kr

20

0.17

84

0.45

86

0.13

82

0.10

trichlorethylene C2HCl3

83

0.10

95

0.22

130

0.22

132

0.21

benzene C6H6
78

0.53

51

0.11

52

0.11

methane CH4

50

0.10

16

0.46

97

0.14

15

0.40

60

0.13

14

0.07

13

0.04

carbon dioxide CO2
44

0.70

28

0.11

16

0.06

methanol CH3OH

12

0.01

31

carbon monoxide CO
28

0.91

12

0.05

16

0.03

ethanol C2H5OH

water H2O
18

0.75

17

0.19

0.43

1

0.05

32

0.23

16

0.02

29

0.18

28

0.03

neon Ne

xenon Xe
132

0.26

129

0.26

20

0.90

131

0.22

22

0.10

134

0.11

136

0.09

31

0.49

45

0.21

nitrogen N2

27

0.09

28

1.00

29

0.07

14

0.12

29

0.01

4 - 10Transpector MPH Operating Manual

Ionization probability factors can be approximated by substituting the relative ion
gauge sensitivities for various gases. Table 4-5 gives relative ion gauge
sensitivities for some common gases.
NOTE: The data was compiled from Empirical Observations on the Sensitivity of
Hot Cathode Ionization Type Vacuum Gauges by R. L. Summers (NASATechnical Note NASA TN D5285, published in 1969). Similar, althoughmore limited, lists of ionization sensitivities can be found in the books by
O’Hanlon (Chapter 8, Section 1.1) and Drinkwine and Lichtman (Table I,
page 5).
HINT: Actual ionization probabilities vary significantly depending on the ionizer
and the electron energy. For best accuracy, measure the relative ionization
probability using a hot cathode ionization gauge (calibrated for nitrogen) tomonitor a known pressure of the substance of interest. The ratio of thegauge reading to the known true pressure is the relative ionization
probability. To determine the true pressure, use a gauge which is gas
species independent (for example, a capacitance manometer) or a gauge
with a known sensitivity factor (for example, a spinning rotor gauge).
Table 4-5 Ionization Probabilities for some Common Substances

Substance

FormulaRelative
Ionization
Gauge
Sensitivity

acetone(CH3)2CO

3.6hydrogen chloride

HCl

1.6

1.0

hydrogen fluoride

HF

1.4

air

Substance

FormulaRelative
Ionization
Gauge
Sensitivity

ammoniaNH3

1.3hydrogen iodide

HI

3.1

argon

Ar

1.2

hydrogen sulfide

H2S

2.2

benzene

C6H6

5.9

kryptonKr

1.7

benzoic acid

C6H5COOH

5.5

lithiumLi

1.9

bromineBr2

3.8

methaneCH4

1.6

butaneC4H10

4.9

methanol

CH3OH

1.8

carbon dioxide

CO2

1.4

neon

Ne

0.23

carbon disulfide

CS2

4.8

nitrogenN2

1.0

carbon monoxide

CO

1.05

nitric oxide

NO

1.2

carbon tetrachloride

CCl4

6.0

nitrous oxide

N 2O

1.7

chlorobenzene

C6H5Cl7.0

oxygenO2

1.0chloroethane

C2H5Cl4.0

n-pentane

C5H12

6.0

chloroform

CHCl3

4.8

phenolC6H5OH

6.2

chloromethane

CH3Cl

3.1

phosphine

PH3

2.6

4 - 11

Transpector MPH Operating Manual

Table 4-5 Ionization Probabilities for some Common Substances (continued)

Substance

FormulaRelative
Ionization
Gauge
Sensitivity

cyclohexane

C6H12

6.4

propaneC3H8

3.7

deuterium

D2

0.35

silver perchlorate

AgClO43.6

dichlorodifluormethane

CCl2F2

2.7

stannic iodide

Snl4

6.7

dichloromethane

CH2Cl2

7.8

sulfur dioxide

SO2

2.1

dintrobenzene

C6H4(NO2)2

7.8

sulfur hexafluoride

SF6

2.3

ethaneC2H6

2.6

tolueneC6H5CH3

6.8

ethanol

C2H5OH

3.6

trinitrobenzene

C6H3(NO2)39.0

ethylene oxide(CH2)2O

2.5

water

H2O

1.0

helium

He

0.14

xenon

Xe

3.0

hexaneC6H14

6.6

xyleneC6H4(CH3)2

7.8hydrogenH2

0.44

Substance

FormulaRelative
Ionization
Gauge
Sensitivity

The analyzer factor, Ab, depends on the transmission and detection characteristicsof the analyzer, the Electron Multiplier gain (if the analyzer is so equipped), and thebasic sensitivity, as indicated in equation [4]:1
A a = -------------------------------------------------TF b  DF ab  G  S[4]Here, TFb is the transmission factor of the mass filter at mass b. The transmission
factor is the fraction of ions at mass b which pass through the mass filter, relative
to nitrogen ions at mass 28. Nominally, the transmission factor is equal to 28
divided by the mass of the ion, b.
The detection factor, DFab, is equal to 1 for a Faraday Cup detector. For an Electron
Multiplier, the detection factor is a function of the mass of the ion and its chemical
nature, and is measured relative to that of a reference gas, typically nitrogen.
In general, as the mass ion increases, the Electron Multiplier detection factor
decreases.
The gain of the Electron Multiplier, G, measured at mass 28 for nitrogen, is theElectron Multiplier output current divided by the Faraday mode output current,
under otherwise identical conditions. The multiplier gain is a strong function of thehigh voltage applied.
The sensitivity of the instrument, S, is the ratio of Faraday mode ion current for agiven pressure of pure nitrogen measured at mass 28, and is typically expressedin amps/Torr.

4 - 12

Transpector MPH Operating Manual

The overall relation between partial pressure and ion current, given in equation [5],is quite general. The constants for this equation can be obtained from various
tables, but for the best accuracy, they should be measured for each instrument.

FF N28PP a =  ----------------------------------------------------------------------------------------   I ab
 FF ab  XF ab  TF b  DF ab  G  S [5]Where:
PPa . . . . . . . . . . . . . . . . . . . . . . . partial pressure of substance a (usually in
Torr)
FFab . . . . . . . . . . . . . . . . . . . . . . . fragmentation factor, or fraction of total ion
current from substance a having mass b(dimensionless; see Table 4-4 on page 4-10)
FFN28 . . . . . . . . . . . . . . . . . . . . . fragmentation factor for N2+ ions at 28 AMU
from nitrogen (dimensionless; typicallyaround 0.9)
XFa . . . . . . . . . . . . . . . . . . . . . . . ionization probability of substance a relative
to nitrogen; approximately the same as therelative ion gauge sensitivity as shown in(dimensionless)
TFb . . . . . . . . . . . . . . . . . . . . . . . transmission factor, the fraction of total ionsat mass b which pass through the mass filter,
relative to ions with a mass of 28 AMU;
nominally, TFM = 28 / M (dimensionless)
DFab . . . . . . . . . . . . . . . . . . . . . . detection factor for mass b ions fromsubstance a, relative to nitrogen at 28 AMU;
assumed to be 1.00 for Faraday detectors,
but varies for Electron Multiplier detectors(dimensionless)
G. . . . . . . . . . . . . . . . . . . . . . . . . Electron Multiplier gain for nitrogen ions at 28
AMU (dimensionless; set equal to 1 fora Faraday Cup detector)
S . . . . . . . . . . . . . . . . . . . . . . . . . sensitivity of instrument to nitrogen, the ion
current at 28 AMU per unit of nitrogen partialpressure (usually in amps/Torr)
Iab . . . . . . . . . . . . . . . . . . . . . . . . ion current of mass peak b resulting fromsubstance a (in amps; assumes that there areno other substances present which
contribute significantly to the total current atmass peak b)

4 - 13

Transpector MPH Operating Manual

4.1.3 Additional Information for Interpreting Mass Spectra
4.1.3.1 Ion Source Characteristics
Transpector MPH (especially the ion source) and the vacuum system configuration
both have an effect on the relative concentrations of the gases detected. In orderto minimize these effects: have the right type of ionizer, the right type of filament,
and the right configuration of the vacuum system. This is particularly true when adifferential pumping arrangement is used because the pressure of the gas to besampled is too high for the sensor to operate. J. O’Hanlon’s book, A User’s Guide
to Vacuum Technology, has a brief discussion (in Chapter 8, Section 2) of some ofthese concerns.
When using Transpector MPH as a residual gas analyzer, the sensor should beinstalled such that the conductance between the ion source and the vacuum region
to be analyzed is maximized. If possible, install the sensor without any intervening
valves or vacuum hardware. If the sensor is equipped with a residual gas analyzer
ion source, there are four classes of interactions between the sensor and theimmediate vacuum environment which can have a significant effect on the detected
gas composition.
First, the analyzer itself is a source of gas molecules because of outgassing fromits surfaces. Usually, the outgassing levels can be reduced by baking the analyzer
in vacuum and by using the Degas function (wherein the ion source surfaces arebombarded by high energy electrons). When operating in the ultra-high vacuum(UHV) region, it is best to bake the sensor overnight at the maximum permissible
temperature with the electronics removed and thermal insulation applied aroundthe sensor feedthrough flange. A second overnight bakeout should be performedat the maximum sensor operating temperature.
NOTE: It can take more than three hours for all parts of the sensor to reachmaximum temperature during a bakeout, and more than six hours to cool
down.

CAUTION
Ensure that the Electron Multiplier (EM) is turned off if the(second) bakeout temperature exceeds the maximum
EM operating temperature. Otherwise, permanent
damage to the EM may result.
Second, it is possible that the opposite of outgassing can occur; that is, gas
molecules can be captured by the surfaces of the sensor. This effect is calledpumping. In such cases, the magnitude of the signals of the gases pumped will belower than is properly representative of the composition of the gas in the vacuum
chamber. Significant temporary pumping effects will frequently occur following
degassing of the ion source.

4 - 14

Transpector MPH Operating Manual

Third, reactions involving gas molecules on surfaces of the analyzer can result ina change of composition. Gases can either be consumed by the surfaces,or produced by the surfaces. One example of gas consumption is the reactionof oxygen with a hot filament, particularly when tungsten filaments are used.
The typical result is an anomalously low concentration of oxygen detected.
See O’Hanlon’s book (Chapter 8, Section 2) for more information on filamentmaterials and their interactions with the gas being analyzed. An example of gases
being produced from surfaces is the liberation of carbon monoxide molecules froma Yttria oxide coated iridium filament by a sputtering mechanism in the presence ofsignificant quantities of argon. This latter mechanism makes the combination of apressure reduction system and a Transpector MPH sensor unsuitable formeasuring nitrogen contamination in argon at the low parts-per-million (PPM) levelfrom a sputter deposition process. A special type of inlet system and ion source (aClosed Ion Source (CIS)) should be used for this type of application.
Fourth, there are cases where at least some of the ions detected are emitted fromsurfaces in the ion source under electron bombardment and are not generated in
the gas phase from neutral molecules. This process is known as electron
stimulated desorption (ESD) or sometimes as electron induced desorption (EID).
When the sensor has been exposed to fluorine containing substances (such as
sulfur hexafluoride, chlorofluorocarbons, perfluorotributylamine, or
perfluorokerosene) for extended periods of time, it is not uncommon for a strong
F+ peak at 19 AMU to remain even after the fluorine containing substance has been
removed. When operating in the UHV region, EID/ESD of H+, C+, O+, and CO+(and other ions) is not uncommon. The clue to diagnosing this problem is that theobserved fragmentation patterns do not match known gas phase patterns. Refer topages five and six, and typical spectra TS-2 through 5, 16, 28, and 30 of Partial
Pressure Analyzers and Analysis by Drinkwine and Lichtman for more information
on EID/ESD.
Transpector MPH is also characterized by varying degrees of mass discrimination;that is, the sensitivity of the instrument is a function of mass. Ion sources show
mass discrimination because various substances offer different degrees of difficultyof ionization. Generally, heavy, large molecules are ionized more readily than light,
small molecules. There is also a rough correlation between the number of electrons
in a molecule and its ease of ionization. Although the total ion yield (i.e., the sumof ions of all masses) is electron energy and ionizer dependent, a reasonableestimate for the number of ions produced (relative to some standard, usuallynitrogen) in an Transpector MPH is the relative ionization gauge sensitivity.
4.1.3.2 Scanning Characteristics
Quadrupole mass filters can also exhibit mass discrimination characteristics
depending on how the control voltages are varied during the sweep through themass range. Most instruments are designed to operate with a constant peak width(constant M) which results in a resolution which is proportional to the mass. This
characteristic provides a good degree of peak separation throughout the mass

4 - 15

Transpector MPH Operating Manualspectrum, but results in an ion transmission efficiency (i.e., the fraction of all ionsof the selected mass entering the mass filter which are transmitted through it) that
decreases as mass increases.
The way the mass scale is calibrated or tuned (i.e., the way the peak positions andwidths are adjusted) can have a significant effect on the transmission efficiency ofthe mass filter across the mass spectrum. If the adjustments are not made properly,
the ratios of peak heights across the mass range will not be correct.
4.1.3.3 Fragmentation Factors
The fragmentation factor is the fraction of the total ion current contributed by ionsof the chosen mass. Only peaks contributing at least one percent to the total ion
current are included in the list. The sum of the factors for all the peaks in a mass
spectrum cannot exceed 1.00. The sum can be less than 1.00 if only some of thepeaks are listed (either there are many peaks, or some of the ions produced lie
outside the mass range of the particular instrument used).
The data presented in Table 4-4 on page 4-10, Typical fragmentation factors forthe major peaks of some common substances, is compiled from more than one
source and is for illustrative purposes only. For maximum accuracy in determining
partial pressures, the fragmentation factors for the substances of interest should bemeasured with the same instrument with the same adjustments as the samples tobe analyzed.

4 - 16

Transpector MPH Operating Manual

Chapter 5
Using Transpector Web UI
5.1 Introduction
Transpector MPH includes Transpector Web UI, an onboard, browser-baseduser interface (UI) that provides remote Transpector MPH control and monitoringfrom network connected devices.
This chapter will discuss the purpose of the requirements for running andinstructions for operating Transpector Web UI.

5.1.1 What is Transpector Web UITranspector Web UI:
displays data in a spectrum window

can perform leak checking when the computer that controls Transpector MPH
is located away from Transpector MPH

provides a diagnostic window that displays instrument status and errors

Transpector Web UI should be used in parallel with a program from theFabGuard Suite.
NOTE: Transpector Web UI does not allow for saving data. It is a remotemonitoring and diagnostic tool. For data saving, selected peaks mode or
trend graphs, a full software program must be used.

5-1

Transpector MPH Operating Manual

5.2 System Requirements
5.2.1 Using Transpector Web UI on Computers
Transpector Web UI allows for Transpector MPH control through standard Internet
browsers. Transpector Web UI is fully supported for use in:

Microsoft Internet Explorer® 10

Mozilla Firefox®

Google ChromeTM

Transpector Web UI is not supported for use in OperaTM or Apple Safari®.
The minimum computer requirements are shown in Table 5-1.
Table 5-1 Minimum computer requirements

Parameters

Transpector Web UI Requirements

Processor

Pentium 4 1.8 GHz or greaterRAM

1 GB or greater

Resolution

1024 x 768 16 Bit color or greater

Operating System*

Windows 8, Windows 7,
Windows Vista, Windows XP**

Communications

Requires Ethernet Port or Wi-Fi†* Transpector Web UI itself does not have operating system requirements. The
requirements for the operating system are dependant on the browser being used.
**Windows XP does not support Internet Explorer 9. Firefox or Chrome arerecommended for use with Windows XP.
† To use Wi-Fi, Transpector MPH must be connected to a Wi-Fi equipped router.

5.2.2 Using Transpector Web UI on Mobile Devices
Transpector Web UI is optimized for 10.1 in. tablet devices such as theSamsung Galaxy Tab, and 9.7 in. devices such as the Apple iPad.
Because Transpector Web UI is browser based, OEM Android/Apple browsers will
not work with the Transpector Web UI. A third party browser must be installed.
Transpector Web UI has not been optimized for use on Android Smart Phones andiPhones. Check http://www.inficon.com for updates.

5-2

Transpector MPH Operating Manual

5.3 Connecting to Transpector Web UI
To connect to Transpector Web UI, the device that is being used for operating
Transpector Web UI must be connected to the same network as Transpector MPH.
If the device is not connected to the same network as Transpector MPH,
Transpector Web UI will not work. In this situation, connecting to a computer thatis on the same network via remote desktop is necessary. Transpector Web UI willthen run on the remote desktop computer.

5.3.1 Connecting to Transpector Web UI with Default Factory IP address
The default web address for Transpector MPH is 192.168.1.100. To connect toTranspector Web UI, type 192.168.1.100 into the browser address box, thenpress Enter. See Figure 5-1.
Figure 5-1 Navigating to Transpector Web UI

NOTE: The device running the browser must also be configured with an addresson this network (e.g., 192.168.1.101).
The browser will connect to Transpector MPH. If Transpector MPH is powered on
and connected to the same network as the device, the Transpector Web UISTATUS webpage will display. See Figure 5-2.

5-3

Transpector MPH Operating Manual

Figure 5-2 STATUS webpage

If the Transpector Web UI STATUS webpage does not display, refresh thebrowser.
If Transpector Web UI STATUS webpage still does not display, verify that theIP address was not changed from the factory default IP address. If the IP address
has been changed, follow the instructions in section 5.3.2.
If the IP address was not changed from the factory default, make sure there are noother devices connected to Transpector Web UI.

5-4

Transpector MPH Operating Manual

5.3.2 Connecting to Transpector Web UI with a User-Defined IP Address
If the IP address has been changed from the default factory IP address, the newuser-defined IP address must be entered into the browser. If the IP address waschanged and the new address has been lost, contact INFICON.

5.4 Navigating Transpector Web UITranspector Web UI functionality is split between several different windows.
To navigate from window to window, click on the button of the desired window.
The buttons are displayed in Figure 5-3.
Figure 5-3 Transpector Web UI window selection buttons

The first window displayed by Transpector Web UI is STATUS. In the following
sections, the different windows are identified and described.
For information on using the different windows, continue to section 5.5, Using
Transpector Web UI, on page 5-10.

5.4.1 STATUS
The STATUS window, see Figure 5-4, provides information regarding
several parameters.
Figure 5-4 STATUS window

5-5Transpector MPH Operating Manual

SENSOR ID . . . . . . . . . . . . . . . . . . . A user-definable ID for the sensor
DESCRIPTION . . . . . . . . . . . . . . . . A user-definable description for the sensor,
useful for identifying different sensors
SERIAL NUMBER . . . . . . . . . . . . . . The factory serial number of the connectedTranspector MPH, each Transpector MPH
has a unique serial number
IP ADDRESS . . . . . . . . . . . . . . . . . . The IP address of the connectedTranspector MPH
SUBNET MASK . . . . . . . . . . . . . . . . The subnet of the connectedTranspector MPH
GATEWAY . . . . . . . . . . . . . . . . . . . . The gateway of the connectedTranspector MPH
DHCP ENABLED . . . . . . . . . . . . . . . Describes whether DHCP is turned
ON or OFFMAC ADDRESS . . . . . . . . . . . . . . . The MAC address of the connectedTranspector MPH
PORT NUMBER . . . . . . . . . . . . . . . The Port that the connectedTranspector MPH is using
MASS RANGE . . . . . . . . . . . . . . . . . The mass range of the connectedTranspector MPH (100, 200 or 300 AMU)
DETECTOR TYPE . . . . . . . . . . . . . . The detector type of the connectedTranspector MPH (either FC or CDEM)EMISSION STATUS . . . . . . . . . . . . The status of the emission of theTranspector MPH sensor (either ON of OFF)EM STATUS . . . . . . . . . . . . . . . . . . The status of the Electron Multiplier (ifequipped) of the Transpector MPH sensor(either ON or OFF)FILAMENT NUMBER . . . . . . . . . . . The Filament currently in use by theTranspector MPH sensor (either 1 or 2)
RELEASE . . . . . . . . . . . . . . . . . . . . The firmware version number
WEB UI RELEASE . . . . . . . . . . . . . Transpector Web UI version number
The STATUS window allows for changing IP address, Port Number,
Sensor ID and Description. For more information, see section 5.5.2.4, Changing
the Transpector MPH IP Address and Port Number, on page 5-23 and section
5.5.2.5, Changing the Sensor ID and Description, on page 5-26.

5-6

Transpector MPH Operating Manual

5.4.2 MONITOR
The MONITOR window, see Figure 5-5, is the data acquisition window ofTranspector Web UI. For instructions on using the MONITOR window, see section
5.5.2.1, Data Acquisition, on page 5-11.
Figure 5-5 MONITOR window

5.4.3 LEAKCHECKThe LEAKCHECK window, see Figure 5-6, is used for leak checking withTranspector MPH. See section 5.5.2.2, Leak Checking, on page 5-14.
Figure 5-6 LEAKCHECK window

5-7

Transpector MPH Operating Manual

5.4.4 DIAGNOSTICS
The DIAGNOSTICS window, see Figure 5-7, includes System Status and otherdiagnostic tools useful when contacting INFICON for assistance.
Figure 5-7 DIAGNOSTICS window

5-8

Transpector MPH Operating Manual

5.4.5 TUNEThe TUNE window, see Figure 5-8, is password locked. It allows for tuning
Transpector MPH. For tuning instructions, see section 5.5.2.3, Tune Mode, on
page 5-17.
Figure 5-8 TUNE window

5.4.6 HELP
Click HELP to display the Transpector Web UI Operating Manual in a separate
browser tab.

5.4.7 PRINT
Click PRINT to display a printing dialog box that allows for printing thedisplayed window.

5-9

Transpector MPH Operating Manual

5.5 Using Transpector Web UIThis section provides instruction for common Transpector MPH applications.

5.5.1 Transpector Web UI and FabGuard
CAUTION
FabGuard and Transpector Web UI cannot access thesame sensor at the same time.
FabGuard is the primary software package for the Transpector MPH sensor, butthere are instances when using Transpector Web UI is appropriate.
A FabGuard parameter defines when FabGuard allows Transpector Web UI toaccess the Transpector MPH sensor. This parameter has three options:
Never: Sensor Cannot Be Independently Operated
FabGuard will never give control of the Transpector MPH sensor toTranspector Web UI. This is the Default setting inside of FabGuard.
If Stopped: Only if the Chamber is Stopped
FabGuard will give control of the Transpector MPH sensor only if the chamberon which the sensor is installed is stopped.
If Stopped or Waiting: Only if the Chamber is Stopped or Waiting for
Acquisition Trigger
FabGuard will give control of the Transpector MPH sensor if the chamber is
stopped or if the chamber is waiting for an acquisition trigger.

5 - 10Transpector MPH Operating Manual

5.5.2 Standalone Transpector Web UI Operation
This section provides instruction for using Transpector Web UI as a standalone
software program.
5.5.2.1 Data Acquisition
The MONITOR window is used for data acquisition.
NOTE: Transpector Web UI does not allow for saving data or displaying the data
in a trend graph. Transpector Web UI is designed for data monitoring andsimple vacuum diagnostics.
When the MONITOR window is first opened, Transpector MPH will begin collecting
data using default parameters shown in Table 5-2.
Table 5-2 Default monitor parameters

Parameter

Value

Min (AMU)

0

Max (AMU)

50

Dwell

32 ms

ppAMU

10

5.5.2.1.1 Editable Parameters
Transpector MPH has editable scan parameters that affect how data is acquired.
The editable parameters are:Emission On/Off . . . . . . . . . . . Turns the filament in the Transpector MPH
ion source on or off. Emission must be ON tocollect data.
EM On/Off . . . . . . . . . . . . . . . . . Turns the EM detector (if equipped) on or off.
Turning on the EM will improve thesignal-to-noise ratio of Transpector MPH andallow for smaller level signals to be seen
above the noise. Emission must be ON toenable the EM to be turned on.
Min . . . . . . . . . . . . . . . . . . . . . . The starting point of the scan in AMU. For allmodels, this can be as low as 0.
Max . . . . . . . . . . . . . . . . . . . . . . The ending point of the scan in AMU. The
maximum point is defined by the model:
100 AMU Transpector MPH can scan up to
100 AMU; 200 up to 200 AMU; 300 up to
300 AMU.

5 - 11

Transpector MPH Operating Manual

Dwell . . . . . . . . . . . . . . . . . . . . . The amount of time that Transpector MPH
averages data for each collected point.
Longer dwell times will decrease noise andincrease scan time while shorter dwell times
will be noisier and decrease scan time.
ppAMU . . . . . . . . . . . . . . . . . . . This is the number of points that
Transpector MPH collects for each AMU.
1 ppAMU will generate a bar chart with a data
point at each integer AMU value. >1 ppAMU
will generate an analog scan showing peak
shapes.
Linear/Logarithmic . . . . . . . . . . Displays the data either in a linear or
logarithmic scale. Since Transpector MPH
has such a large Dynamic Range, log scale
is often helpful for seeing low levelcontaminants.
5.5.2.1.2 How To Change Scan Parameters
On the right side of the MONITOR window is a group for controlling EMISSION and
EM. See Figure 5-9. In this group are editable boxes that change the scanparameters described in section 5.5.2.1.1.
Figure 5-9 Where to change scan parameters

To turn On/Off Emission, click EMISSION. There is an indicator on the right side of
the EMISSION button. This indicator changes color based on emission state.
There are three colors, as shown in Figure 5-10.
Figure 5-10 Emission status

5 - 12

Transpector MPH Operating Manual

The Electron Multiplier is controlled the same way as the emission. To turn theElectron Multiplier on or off, click EM. There are only two different EM states:
OFF (Black) and ON (Green). See Figure 5-11.
Figure 5-11 Electron multiplier status

Emission and EM are the only settings that, when altered, have an immediate
impact on data collection.
The other scan parameters can be changed, but will not affect the data collection
until SET is clicked. Click SET to restart data acquisition using the changed
parameters.
To change Min/Max AMU values, highlight the current value in the appropriate box
and type in the Min or Max AMU value that is desired. Click SET to start collecting
data in the new mass range.
Dwell and ppAMU are changed by a drop-down list which includes all allowablevalues. Once either parameter is changed, click SET to start collecting data with
the new parameters.
EM Voltage displays the voltage of the Electron Multiplier.

5 - 13

Transpector MPH Operating Manual

5.5.2.2 Leak Checking
Transpector MPH is commonly used as a leak check tool by:

determining leaks by detecting helium that is being sprayed and thenmonitoring the change in helium concentration

indicating the presence of a leak by showing increased levels of nitrogen,oxygen and carbon dioxide

Click LEAKCHECK to display the LEAKCHECK window. Upon entering the
LEAKCHECK window, Transpector MPH will start collecting data using the default
parameters as shown in Table 5-3.
The Transpector Web UI LEAKCHECK window utilizes Transpector MPH signal
levels to generate alarm statuses. When the LEAKCHECK window is first entered,Transpector Web UI auto-generates alarm levels based on the current Masssignal.
Table 5-3 Leak check default parameters

Parameter

Default Value

Mass

4 (helium)

Dwell

32 ms

Emission

Uses Current Transpector MPH status

EM (if equipped)

Uses Current Transpector MPH status

NOTE: Emission must be turned on to perform a leak check.

5 - 14

Transpector MPH Operating Manual

5.5.2.2.1 Leak Check Components
Figure 5-12 points out the different components of the LEAKCHECK window.
This section will discuss the different leak check functions.
Figure 5-12 LEAKCHECK window

1

2

3
5

4

1 ALARM/WARNING SETTINGS—The ALARM/WARNING SETTINGS groupis used to manually or automatically change the alarm levels for leak checking.
Clicking AUTO SET causes Transpector Web UI to automatically generate
alarm levels based on recent data acquired. To manually set alarm levels,
highlight the alarm level of interest, type the desired alarm level, then click SET.

2 Transpector MPH Scan Parameters—Transpector MPH can use any mass
for leak detection. To change the mass, highlight the mass shown in the MASS
box, type the new desired mass, then click SET.
The DWELL time that is used for the mass that is being analyzed can bechanged. DWELL behaves the same way as in data acquisition, see section
5.5.2.1.1, Editable Parameters, on page 5-11. The DWELL time does notchange until SET is clicked.

5 - 15

Transpector MPH Operating Manual

NOTE: ALARM/WARNING SETTINGS and Transpector MPH Scan Parameters
each have a SET button next to the changeable parameters.
The SET buttons are not interchangeable.


To change alarm and warning settings, click SET next to the ALARM
and WARNING group.

To change scan parameters, click SET next to the MASS and DWELL
group.

3 Thermometer Bar—The Thermometer bar shows the real-time level of thesignal. The bar will raise and lower based on the signal in amps of the specified
mass. If the signal exceeds warning or alarm levels, the color of the bar willchange. See Figure 5-13.
Figure 5-13 Thermometer bar levels

4 EMISSION and EM Control—These work the same as EMISSION and EM in
the MONITOR window (section 5.5.2.1.1, Editable Parameters, on page 5-11).
Click EMISSION or EM to turn on or off the emission or EM.

5 Mass Trend Graph—The mass trend graph will display how the signal(in amps) for the specified mass changes with time. There are two lines(one yellow and one red) on the trend graph. These lines represent warningand alarm levels. When the signal increases above the alarm level lines, a leakis present.

5 - 16

Transpector MPH Operating Manual

5.5.2.2.2 Using the Leak Check Mode
To leak check with Transpector MPH using Transpector Web UI:

1 Click LEAKCHECK to display the LEAKCHECK window.
2 Determine the gas that will be used for leak checking.
3 Enter the MASS of the leak check gas.
HINT: Typically the leak check gas is helium, whose mass is 4 AMU.

4 Select the desired DWELL time. A longer dwell will decrease the random noiseof the signal.

5 Click SET.
NOTE: If audio alarms are desired, make sure that the computer audio output
is at an appropriate level and Google Chrome is used as the browser.

6 If the signal starts exceeding the alarm levels while not spraying the leak checkgas, click AUTO SET to automatically reset the alarm levels to reduce thesignal below the current alarm. AUTO SET implies that the signals generatedby Transpector MPH are normal and displays green for alarm status.

7 Spray leak check gas around the area of interest and monitor for changes in
the Mass Trend Graph.

8 Continue spraying the leak check gas until the Thermometer Bar indicates analarm status with a change in color.
NOTE: An audible alarm will be heard if Google Chrome is the browser andsound is enabled.

9 When finished with leak checking, leave the LEAKCHECK window.
5.5.2.3 Tune Mode
Transpector Web UI allows for mass-scale tuning of Transpector MPH. Since
tuning can alter the quality of data recorded by Transpector MPH, the TUNE
window is password locked. To enter the TUNE window, click TUNE and type thepassword: Admin.

CAUTION
Tuning of Transpector MPH should only be done byqualified operators. Changes to the tune file can affectthe ability to accurately collect data.
Do not enter Tune Mode without being well versed in how
to tune Transpector MPH.

5 - 17

Transpector MPH Operating Manual

5.5.2.3.1 Tune Mode Components
Figure 5-14 points out the different components of the TUNE window. This section
will outline the different components and discuss their functionality.
Figure 5-14 Tune Mode components

1
2
3
4
5
6
7
8

9

11

10
8
12
11

13

1 CHANGE TUNE MASSES—Click CHANGE TUNE MASSES to change themasses used for Transpector MPH tuning. The Tune Table Editor will display,which allows for editing the tune masses. See Figure 5-15.
Figure 5-15 Tune table

2 SCAN MASS—The SCAN MASS drop-down is used to select the mass to be
tuned.

5 - 18Transpector MPH Operating Manual

3 SCAN WIDTH—The SCAN WIDTH drop-down sets the width to scan aroundthe Scan Mass. This is useful for finding a mass that is far from its expectedmass position.

4 INTENSITY and 10% R—Lists the intensity in Amps of the peak being tuned.
The 10% R box displays the width of the peak at 10% peak height.

5 EMISSION/EM controls—Turns on and off the emission and electron
multiplier.

6 MASS TARGET—A red line is displayed at the peak of interest.
For example, when mass 2 is scanned, the mass target will be displayedat mass 2.

7 Transpector MPH spectrum data—This line displays the Transpector MPH
data for the scan width selected.

8 POSITION buttons—The POSITION buttons change the location of the peak.
There are two different buttons on each side. The single button (< or >) will
finely move the peak. The double button (<< or >>) moves the peak theequivalent of ten clicks of the single button.
NOTE: The POSITION buttons move the peak in the direction of the arrows(i.e., the << button will move the peak left).

9 WIDTH buttons—The WIDTH buttons increase or decrease the width of thepeak to achieve target 10% R. The single button (< or >) will finely change thepeak width. The double button (<< or >>) is a change equivalent to ten clicks ofthe single button.
NOTE: The WIDTH buttons are not directional. For example, both << and >>increase the width equally around the mass.

10 Transpector MPH scan parameters—These scan parameters affect theTranspector MPH scan. Click SET to send the parameters toTranspector MPH.
DWELL. . . . . . . . . . . . . . . . . . . . The amount of time that Transpector MPH
averages data for each collected point.
Longer dwell times will decrease noise andincrease scan time. Shorter dwell times will
be noisier and decrease scan time.
ppAMU. . . . . . . . . . . . . . . . . . . . The number of points that Transpector MPH
collects for each AMU. 1 ppAMU will
generate a bar chart with a data point at each
integer AMU value. >1 ppAMU will generate
an analog scan showing peak shapes.

5 - 19Transpector MPH Operating Manual

EM Voltage . . . . . . . . . . . . . . . . The voltage of the EM (if equipped). The
minimum voltage for the EM is 600 V. The
maximum voltage for the EM is 2000 V. The
default voltage for the EM is 800 V. Changing
this value will impact the gain of the Electron
Multiplier. This is useful only when trying toresolve a peak from the noise floor. EM
voltage should be changed only by
experienced operators.
ROD POLARITY . . . . . . . . . . . . Defines the polarity of the Quadrupole rods.
In the factory, Rod Polarity is determined foreach individual Transpector MPH to produce
optimum tune quality. Do not alter this setting
unless directed by INFICON.
SENSOR TYPE . . . . . . . . . . . . . Defines whether the sensor is equipped withan EM/FC combination or an FC only
detector. Do not alter this setting unlessdirected by INFICON.
EMISSION CURRENT . . . . . . . . The Emission Current affects the current at
the filament in the ion source. This has been
optimized in the factory for each individual
Transpector MPH to produce optimum tune
quality. Do not alter this setting unlessdirected by INFICON.
FOCUS Voltage . . . . . . . . . . . . . Changes the voltage of the focus plates
which generate an ion beam from the ion
source. This has been optimized in thefactory for each individual Transpector MPH
to produce optimum tune quality. Do not alter
this setting unless directed by INFICON.
FILAMENT NUMBER. . . . . . . . . Transpector MPH has dual filaments. This
allows for switching from one filament to theother.

11 MARKERS button and displayed marker—MARKERS turns on and off themarkers. The marker consists of two components: a vertical one that
represents the highest intensity of the displayed peak and a horizontal one thatindicates 0.9 AMU width at 10% peak height.

12 CAL GAS button—CAL GAS will open the calibration gas if installed(Only used on HPR systems).

13 SUBMIT button—SUBMIT submits the changes made to Transpector MPH
tune into the Transpector MPH Non-Volatile RAM (NVRAM) in theTranspector MPH electronics box. SUBMIT must be clicked to save thechanges made on the Tune window.

5 - 20Transpector MPH Operating Manual

5.5.2.3.2 Default Tune Mode Parameters
When first entering the TUNE window, Transpector Web UI is set with the default
parameters displayed in Table 5-4.
Table 5-4 Default Tune Mode parameters

5 - 21

Parameter

Value

Dwell

32 ms

ppAMU

25

Electron Energy

70 eV

Scan Mass

1 AMU

Scan Width±2 AMUTranspector MPH Operating Manual

5.5.2.3.3 Tuning Transpector MPH
During normal operation, the tune should not deviate much from the original factorytune. This tuning guide will only discuss fine tuning of the sensor. If the tune has
been altered significantly, contact INFICON.
Tuning Transpector MPH involves mass alignment (ensuring that the peak isaligned with the proper AMU) and width adjustment.
Tuning RGAs is not something that should be done by novice users. For generaltuning instructions, see section 6.6.1 on page 6-15. These tips and instructions
should be reviewed prior to doing any tuning regardless of the interface.
Instructions for tuning Transpector MPH using the Transpector Web UI interface
are as follows:

1 Click CHANGE TUNE MASSES. A tune table will display, see Figure 5-15.
To remove masses from the tune table, click the mass to remove, then click
REMOVE.

CAUTION
Do not remove masses 1, 2 or 4. Removing the low tune
masses can significantly alter the higher-mass tuning.
To add masses to the tune table, type the mass into the box next to ADD,
then click ADD. The default Tune masses are displayed in Table 5-5.

Using the tune table, select the masses that will be tuned.
Table 5-5 Factory tune settings

100 AMU

200 AMU

300 AMU

Mass

10% R

Mass

10% R

Mass

10% R

1

0.5 ±0.10

1

0.5 ±0.10

1

0.5 ±0.102

0.9 ±0.05

2

0.9 ±0.05

2

0.9 ±0.05

4

0.9 ±0.05

4

0.9 ±0.05

4

0.9 ±0.05

28

0.9 ±0.05

28

0.9 ±0.05

28

0.9 ±0.05

86

0.9 ±0.05

86

0.9 ±0.05

86

0.9 ±0.05

134

0.9 ±0.05

134

0.9 ±0.05

293

0.9 ±0.05

2 Ensure that the emission has been on and the RGA has been scanning for
30 minutes prior to tuning. Transpector MPH can be tuned either with the EM
on or off.

5 - 22

Transpector MPH Operating Manual

3 Select the mass to tune using the TUNE MASSES drop-down.
The default tune mass is mass 1, but mass 1 should not be tuned unless
instructed by INFICON.

Transpector Web UI is capable of tuning one mass at a time.

Ensure that a gas is present that represents the selected mass.

4 Transpector MPH will begin scanning based on the tune mass selected, thetune width selected (± 2 AMU is default and satisfactory for fine tuning) and theTranspector MPH PARAMETERS.

5 Click MARKERS to display the markers. This will generate a marker that shows
the highest intensity point of the peak and the width at 10% Peak Height.

6 Use POSITION to align the MASS TARGET to the vertical MARKER.
When done properly, the target and marker will overlap.

7 Use WIDTH to change the 10% R that is displayed in the 10% R box.
An ideal 10% R is 0.90 ± 0.05.

8 While adjusting the width of the peak, the peak position can change a bit.
Repeat steps 6 and 7 until the peak position is accurate and the 10% R
is 0.90 ± 0.05.

9 Repeat Steps 3-8 for each Tune Mass. Then repeat Steps 3-8 for each tune
mass again to make sure that tuning of higher masses have not shifted lower
masses.

10 Once Transpector MPH is tuned, click SUBMIT to store the new tune file into
Transpector MPH.
5.5.2.4 Changing the Transpector MPH IP Address and Port Number
The Transpector MPH IP address and Port Number are set on the STATUS
window.
NOTE: If the IP address of Transpector MPH is changed, Transpector Web UI will
no longer be accessible by the default IP address. You will need to reenterTranspector Web UI by entering the new IP address into the address boxof the browser after the Transpector MPH has been turned off then on. You
may also have to change the IP address of your device (e.g., computer)depending on the newly changed Transpector MPH IP address.

5 - 23

Transpector MPH Operating Manual

5.5.2.4.1 Manually Changing the IP address
To manually change the IP address of Transpector MPH:

1
2
3
4
5
6

Click STATUS to display the STATUS window.
In the SETTINGS group, delete the current IP ADDRESS. See Figure 5-16.
Type the new IP ADDRESS.
Click SET.
A notification is displayed, see Figure 5-17. Click OK.
Transpector MPH will reboot automatically and will use the new IP ADDRESS.

Figure 5-16 IP address

Figure 5-17 Rebooting Transpector MPH

5 - 24

Transpector MPH Operating Manual

5.5.2.4.2 Using DHCP to Allow the Network to Assign an IP address
By default, DHCP ENABLED is set to OFF. To turn DHCP on (refer to Figure 5-16):

1 Select ON from the DHCP ENABLED drop-down.
2 Click SET.
3 Power off and then power on Transpector MPH.
4 Upon power on, the Transpector Web UI browser session will be connected tothe original IP address and will not work.

5 In order to reconnect to Transpector Web UI, the INFICON Mass Spectrometer
Search Utility must be run to find the new Transpector MPH IP address. The
IMSSU will locate Transpector MPH and display the new IP address. Refer tosection 2.3.1.1, Using the INFICON Mass Spectrometer Search Utility to
Change the IP Address, on page 2-4,

6 To return to Transpector Web UI, the new IP address must be entered in theaddress bar of the browser.

CAUTION
If you do not have the IMSSU installed on your computer,
you will not be able to determine the new IP address ofTranspector MPH.

5.5.2.4.3 Changing the Port Number of Transpector MPH
Transpector MPH is set with a default port number of 80. If this port is blocked by
the network that Transpector MPH is installed on, the port number must bechanged. To change the port number:

1 Connect a computer with an open port 80 to Transpector MPH.
2 Open Transpector Web UI.
3 Enter the STATUS window.
4 Delete the port number in the PORT NUMBER box and type thenew port number.

5 Click SET.
6 Reboot Transpector MPH. After reboot, Transpector MPH will communicate via
the new port number and can be connected to the network.

5 - 25

Transpector MPH Operating Manual

5.5.2.4.4 Changing the Subnet Mask of Transpector MPH
Transpector MPH is set with a default subnet mask of 255.255.0.0. The subnet
mask of Transpector MPH must match the subnet mask of the computer networkthat it is installed on. To change the subnet mask:

1 Connect Transpector MPH to a computer with a subnet mask of 255.255.0.0.
2 Open Transpector Web UI.
3 Enter the STATUS window.
4 Delete the subnet mask in the SUBNET MASK box and type the new subnet
mask.

5 Click SET.
6 Reboot Transpector MPH. After a reboot, Transpector MPH will use the proper
subnet mask for the network to which it is connected.
5.5.2.4.5 Changing the Gateway of Transpector MPH
Transpector MPH is set with a default gateway of 0.0.0.0. If the network on which
Transpector MPH is connected requires a gateway:

1 Connect Transpector MPH to a computer with a gateway of 0.0.0.0.
2 Enter Transpector Web UI.
3 Enter the STATUS window.
4 Delete the gateway in the GATEWAY box and type the new gateway.
5 Click SET.
6 Reboot Transpector MPH. After a reboot, Transpector MPH will use the proper
gateway for the network to which it is connected.
5.5.2.5 Changing the Sensor ID and Description
Sensor ID and Description are changeable on the STATUS window.

1 Click STATUS to display the STATUS window.
2 To change either the Sensor ID or the Description, delete the current ID or
Description and type the new ID or Description.

3 Click SET.

5 - 26

Transpector MPH Operating Manual

5.6 Transpector Web UI Best Known Methods
5.6.1 When to Use Transpector Web UITranspector Web UI does not save data. It is not a quantitative tool.
The following is a list of suggested applications for Transpector Web UI.
5.6.1.1 Vacuum Diagnostics
A common application for Transpector Web UI is to run general vacuum
diagnostics. This is useful when a vacuum system is having difficulty pumping
down or has an unknown contaminant. Some knowledge of reading RGA spectra
is necessary for this application.
To perform vacuum diagnostics, enter the MONITOR window ofTranspector Web UI. After choosing the settings that are appropriate for theapplication, Transpector MPH will scan through the indicated mass range. A quick
qualitative analysis can then be performed to determine what is present inside of
the system. For deeper analysis, use FabGuard software.
5.6.1.2 Leak Checking
Transpector Web UI is useful as a leak checking tool. Upon first entering the
MONITOR window, peaks at 28 (nitrogen), 32 (oxygen), and 44 (carbon dioxide)
indicate the presence of a leak. If the leak is not an air leak, different masses canbe monitored.
After determining the presence of a leak, leak checking can be performed by the
LEAK CHECK window. While spraying helium around the vacuum system,
Transpector Web UI will indicate the presence of helium, indicating the location of
the leak.
5.6.1.3 Remote Monitoring
Transpector Web UI allows for access to Transpector MPH from a remote,network-connected computer without the limitations of a Remote Desktop
Connection.
If FabGuard is idle, Transpector Web UI can remotely collect data and verify thestatus of the vacuum system.

5 - 27

Transpector MPH Operating Manual

5.6.2 Generating Shortcuts for Quick Access
Since Transpector Web UI is browser based, shortcuts can be generated that will
open a browser and direct it to the attached webpage address. In this manner,remembering the IP address for one (or multiple) Transpector MPH sensors is notnecessary. Creating shortcuts also allows for differentiating between different
Transpector MPH when more than one is present on the network.

1 Open Transpector Web UI.
2 Highlight the webpage address in the browser, right-click, then click Copy.
See Figure 5-18.
NOTE: There can be more than one shortcut per sensor. For example, ashorted can be created to display the MONITOR window, and adifferent shortcut to display the LEAK CHECK window.
Figure 5-18 Copy web address

3 Right-click on the Desktop and select Create New >> Shortcut.
See Figure 5-19.
Figure 5-19 Create new shortcut

5 - 28Transpector MPH Operating Manual

4 In the Create Shortcut window, paste the webpage address ofTranspector Web UI. See Figure 5-20.
Figure 5-20 Paste webpage address

5 Click NEXT. See Figure 5-21.
Figure 5-21 Next

5 - 29Transpector MPH Operating Manual

6 Enter a name for the shortcut. This is where a Sensor ID is useful for naming
the shortcut. See Figure 5-22 and Figure 5-23.
Figure 5-22 Entering a name for the shortcut

Figure 5-23 Differentiating name

7 The shortcut will now be generated on the desktop with the name given
to it in step 5. See Figure 5-24.
Figure 5-24 Shortcut icon

CAUTION
If the IP address of Transpector MPH is changed, theshortcuts will not work.

5.6.3 Creating Bookmarks
In addition to creating shortcuts on the computer desktop, bookmarks can also be
generated inside of the internet browser. To set a bookmark, press Ctrl+d when at
the intended webpage address. The bookmark can then be named to differentiate
different functions and sensors.

5 - 30Transpector MPH Operating Manual

5.6.4 Using Wi-Fi
INFICON offers an optional 4-port push button Wi-Fi router (PN 961-417-P1) as anaccessory for Transpector MPH. This router provides the capability to turn the
Wi-Fi on/off with the push of a button on the router. The router also allows forcontrolling the diameter of the router range. This allows for either only turning the
Wi-Fi signal on when needed or controlling the range of the Wi-Fi signal to limit
access to the exterior of the tool.
5.6.4.1 Why Use Wi-Fi?
Transpector MPH connected to a Wi-Fi router allows access toTranspector Web UI from any Wi-Fi device (laptops, tablets, etc.). Leak checking
using the handheld Wi-Fi device to monitor for leaks is a much easier task.

5.7 Troubleshooting
The main problems that will occur with operating Transpector Web UI involvecommunications problems. If Transpector Web UI cannot be opened, check thefollowing:

1 Is anyone else using Transpector Web UI? Transpector Web UI will block any
incoming requests when it is actively being used.

2 Is the web address (IP address of Transpector MPH) correct? If the IP address
was recently changed, make sure that the browser is directed to the correct
address.

3 Does Transpector MPH have 24 V (dc) power supplied to it? If yes, try resetting
the power.

4 Is the Ethernet cable connected to Transpector MPH and the network?
5 Try clearing the web browser chache. For instructions, visit the help files of thebrowser being used.

6 If these steps do not solve the problem, connect Transpector MPH directly tothe computer (bypassing the router/network) and try connecting.
If Transpector Web UI starts working, it is likely that Transpector MPH has aconflict with its IP address (another device on the network has the same
IP address) or the port that Transpector MPH is using is being blocked by the
network/router. See section 5.5.2.4, Changing the Transpector MPH
IP Address and Port Number, on page 5-23.
If Transpector MPH is still not working, contact INFICON.

5 - 31

Transpector MPH Operating Manual

Chapter 6
Maintenance
6.1 Introduction
The Transpector MPH sensor is subject to aging in normal use and some of its
components will eventually require repair or replacement.
The Transpector MPH electronics module does not normally require repair ormaintenance.

WARNING - Risk Of Electric Shock
Opening the Transpector MPH Electronic Module should
only be done by qualified service personnel. There are nouser-serviceable parts inside the Electronic Module.
INFICON provides complete maintenance service for both sensors and Electronic
Modules. Refer to section 1.3, How To Contact Customer Support, on page 1-3.

6.2 Safety Considerations
If Transpector MPH is used in a manner not specified by INFICON, protection
provided by the equipment may be impaired.

6.2.1 Toxic Material
The Transpector MPH sensor does not contain any toxic material. However, if theTranspector MPH sensor is used in an application wherein toxic material is used or
generated, residue of the toxic material will likely be present on the surface of theTranspector MPH sensor. Appropriate safety precautions must be taken whenhandling contaminated sensors in order to assure safety of maintenancepersonnel.
To return the sensor to INFICON for repair, refer to section 1.3.1, Returning Your
Transpector MPH to INFICON, on page 1-3.
The Transpector MPH electronics module is RoHS compliant.

6.2.2 Radiation
Transpector MPH Gas Analysis systems are not known to produce
harmful radiation.

6-1

Transpector MPH Operating Manual

6.2.3 Electrical Voltages
Transpector MPH does not present electrical hazards when enclosed andgrounded according to the specifications given in the installation instructions.

WARNING - Risk Of Electric ShockIf the Transpector MPH electronics module is operated
while open, hazardous electrical voltages may bepresent. Such operation should not be attempted except
by qualified service personnel.

6.3 General Instructions For All Repair Procedures
CAUTION
Perform any servicing in a clean, well illuminated area.
Wear clean, nylon, lint free lab gloves or finger cots.
Do not touch the vacuum side of the sensor with
unprotected fingers.
Use clean tools.

6-2Transpector MPH Operating Manual

6.4 Maintenance Procedures
6.4.1 Bakeout of Quadrupole
If the symptoms in section 7.2, Symptom-Cause-Remedy Chart, on page 7-1,
suggest that the sensor is contaminated, try first to restore normal performance bybaking the sensor under a high vacuum — at least 1 x 10-5 Torr (1.333 x 10-5 mbar)[1.333 x 10-3 Pa] — for several hours, preferably overnight. Table 6-1 represents
the maximum bakeout temperatures.
If baking the sensor doesn’t increase the sensor performance, it may be necessary
to perform the tasks described in section 6.5.3, Filament Kit Replacement, on page
6-6 and also in section 6.5.4, Ion Source Removal, on page 6-9.
If the procedures explained above do not solve the problem, contact INFICON.
Refer to section 1.3, How To Contact Customer Support, on page 1-3.
Table 6-1 Maximum bakeout temperatures

Faraday Cup Sensors
Electron Multiplier
Faraday Cup
Combination

EM ModeFC ModeWhile
OperatingWith
Electronics
Removed

200C

300C

150C
200C

300C
300C

CAUTION
When heating the sensor above 200C, the electronics
module and the signal contact must be removed from thesensor.

6.4.2 Spare Heating Jacket Part Numbers
INFICON offers several heating jackets to help in baking a sensor. These heating
jackets operate at a maximum temperature of 150C.
Heating jacket part numbers are shown in Table 10-1 on page 10-1.

6-3

Transpector MPH Operating Manual

6.5 Repair Procedures
6.5.1 Tools Required
6.5.1.1 Tools for Replacing the Filament Kit


3 mm Nut Driver

1/16 in. Flat Blade Screwdriver

6.5.1.2 Tools for Replacing the Ion Source

1/16 in. Flat Blade Screwdriver#2 Phillips Head ScrewdriverPrecision Pliers

6.5.1.3 Tools for Replacing the Electron Multiplier

6-4



1/16 in. Flat Blade ScrewdriverPhillips Head Screwdriver

1.5 mm x 50 mm Hex Driver

2.0 mm x 75 mm Hex DriverPrecision Pliers

Non-Metallic Tweezers

Transpector MPH Operating Manual

6.5.2 How to Determine if a Filament Kit Replacement is Required
Follow these steps to determine if a filament replacement is required. Rememberthat Transpector MPH has dual filaments, so if one filament is blown, but thesecond filament is intact, Transpector MPH can still be used with the second
filament.
NOTE: Performance of the second filament may be impacted by previous use of
Transpector MPH.

1 Measure the resistance of each filament. This can be accomplished while thesensor is under vacuum by measuring the resistance between pins 3 and 10
for filament 1 and pins 4 and 10 for filament 2 (see Figure 6-1 on page 6-5). A
failed filament will measure open while an intact filament will measure 0.8 Figure 6-1 Sensor pinout

6

8

7

5

1

4
3

9
10
11
12

2

13

Table 6-2 Pin assignment

Pin

Assignment

Pin

Assignment

1

PP

8

GND

2

EM HV

9

RF+

3

Filament 1

10

Filament Common

4Filament 2

11

Reserved

5

Anode

12

Focus

6

RF-

13

TP

7

GND

6-5

Transpector MPH Operating Manual

NOTE: Although the following measurements may measure below 30 M with thefilament assembly and ceramic shield in place, they must be above 30 M
when measured with the filament assembly and ceramic shield removed.

2 Measure the resistance of each of the pins with respect to ground(pin 7 and 8). These measurements must be above 30 M.

3 Measure the resistance of each of the pins with respect to each other. All ofthese measurements must be above 30 M, with the exception of themeasurements between each filament pin and the filament common pin if thefilaments have not failed.

6.5.3 Filament Kit Replacement
A filament replacement kit can be purchased from INFICON. This kit contains a
new filament assembly mounted on a shipping fixture and a small Allen wrench.
Perform the following steps to replace the filament.
NOTE: Refer to section 6.5.1.1, Tools for Replacing the Filament Kit, on page 6-4,
before continuing.

CAUTION
Neither the filament assembly or the ion source can becleaned. When dirty, they must be replaced.

1 Using the 3 mm nut driver, remove the three nuts and lock washers (A)from the standoffs.
Figure 6-2 Removing the nutsA

6-6

Transpector MPH Operating Manual

2 While holding the clamps with the pliers, use the flat blade screwdriver toloosen the clamps holding the filament leads (B). Gently pull the leads awayfrom the filament assembly.
Figure 6-3 Remove the leads

B

3 Carefully pull the filament assembly from the ion source.
Figure 6-4 Remove the filament assembly

6-7Transpector MPH Operating Manual

4 Carefully remove the new filament assembly from its packaging and place it on
the ion source standoffs.

CAUTIONThe new filament assembly must be carefully placed onto
the ion source. Excessive horizontal movement willcause the damage to the anode.

5 Replace the three washers and locknuts, and ensure that the anode (C) aligns
with the mating bore (D).
Figure 6-5 Align anode to mating bore

C

D

6-8

Transpector MPH Operating Manual

6 Tighten the washers (A).
7 Insert the filament leads back into the clamps and tighten.
8 Using an ohmmeter, check that the filament is not shorted to ground and thatthe filament shows a resistance of approximately 0.8  at the feedthrough.

6.5.4 Ion Source Removal
Proceed as follows to remove the ion source.
NOTE: See section 6.5.1.2, Tools for Replacing the Ion Source, on page 6-4
before continuing.

1 While holding the clamps with pliers, use the flat blade screwdriver to loosen
the clamps holding the filament leads (A) and ion source leads (B - one ishidden in the figure). There are a total of six leads that need to be loosened.
Figure 6-6 Detach leads

A

B

6-9

Transpector MPH Operating Manual

2 Pull the electrical leads away from the sensor.
CAUTION
Do not bend the leads.

3 Using the Phillips head screwdriver, remove the gold screws (C - one is hiddenin the figure) that hold the ion source onto the quadrupole. There are threescrews.
Figure 6-7 Remove screws holding ion sourceC

4 Lift the ion source off the quadrupole assembly.
5 Install the new ion source by reversing the above steps.
6 Using an ohmmeter, check:6 - 10that both filaments are not shorted to ground or to any of the lenses

that the filament leads show a filament resistance of approximately 0.8  at
the feedthrough between each filament pin and the filament common pin,refer to Figure 6-1 on page 6-5 for pin out locations

Transpector MPH Operating Manual

6.5.5 Electron Multiplier Replacement
The following steps should be performed to remove the ion source:
NOTE: Refer to section 6.5.1.3, Tools for Replacing the Electron Multiplier, on
page 6-4 before continuing.

1 While holding the clamps with the pliers, use the flat blade screwdriver toloosen the clamps holding the filament leads (A) and ion source leads (B - one
is hidden in the figure). There are a total of six leads that need to be loosened.
Using the 1.5 mm x 50 mm hex driver, unscrew the screws (C) holding the two
RF leads. Make sure to remove the lock washers as well.
Figure 6-8 Detach leads

A

B
C

2 Gently pull the electrical leads away from the sensor.
CAUTION
Do not bend the leads.

6 - 11

Transpector MPH Operating Manual

3 Using the 2.0 mm x 75 mm hex driver, unscrew the three screws (D - one ishidden in the figure) holding the sensor assembly to the feedthrough. Gently
remove the sensor assembly from the feedthrough.
Figure 6-9 Removing the sensor assemblyD

6 - 12

Transpector MPH Operating Manual

4 Using the Phillips head screwdriver, remove the three gold screws (E - one ishidden in the figure) holding the EM assembly inside of the sensor assembly.
Figure 6-10 Removing the screws holding the EME

5 Gripping the bottom of the EM assembly, gently remove the EM from the sensor
assembly.
Figure 6-11 EM detector

6 - 13

Transpector MPH Operating Manual

6 Remove the ceramic shield on the bottom of the old detector assembly.
Figure 6-12 Removing ceramic shield

7 Install the ceramic shield removed in step 6 onto the new Electron Multiplierassembly.

8 Install the new Electron Multiplier assembly into the sensor can.
9 When installing the sensor back into the feedthrough, ensure that the two pinson the bottom of the detector align with the two pins shown in Figure 6-13.
Figure 6-13 Pin location

Detector Pins

10 Reverse steps 1-4 to reassemble the Transpector MPH sensor.
6 - 14

Transpector MPH Operating Manual

6.6 Calibration
6.6.1 Mass Alignment
Transpector MPH is tuned such that it generates a known RF/DC ratio that allows
one mass to exit the quadrupole at a time. When tuning the mass scale ofTranspector MPH, the RF/DC ratio is fine tuned to each tune mass.
6.6.1.1 Factory Tuning
In the factory, Transpector MPH is tuned to different masses depending on themass range of Transpector MPH. The factory tune masses and width standards
are displayed in Table 6-3.
Table 6-3 Factory tune settings

100 AMU

200 AMU

300 AMU

Mass

10% R

Mass

10% R

Mass

10% R

1

0.5 ±0.10

1

0.5 ±0.10

1

0.5 ±0.102

0.9 ±0.05

2

0.9 ±0.05

2

0.9 ±0.05

4

0.9 ±0.05

4

0.9 ±0.05

4

0.9 ±0.05

28

0.9 ±0.05

28

0.9 ±0.05

28

0.9 ±0.05

86

0.9 ±0.05

86

0.9 ±0.05

86

0.9 ±0.05

134

0.9 ±0.05

134

0.9 ±0.05

293

0.9 ±0.05

The gases that are used for factory tuning of these masses are:hydrogen (mass 1 and 2)

helium (mass 4)nitrogen (mass 28)krypton (mass 86)

xenon (mass 134)

FC5311 (mass 293)

6 - 15

Transpector MPH Operating Manual

6.6.1.2 Selecting Tune Masses
The most important portion of mass scale tuning is determining which masses areto be tuned.
Transpector MPH has two different calibration standards available as options.


If Transpector MPH has the CPM Test Mixture Calibration Reference installed,
continue to section 6.6.1.2.1, Selecting Masses for Tuning with a CPM Test
Mixture Calibration Reference, on page 6-16.



If Transpector MPH has the Argon Standard Calibration Reference installed,
continue to section 6.6.1.2.2, Selecting Masses for Tuning with an Argon
Standard Calibration Reference, on page 6-17.

If Transpector MPH does not have an optional calibration standard, there are threedifferent methods of tuning.
To tune using a user-supplied test mixture, continue to section 6.6.1.2.3,
Selecting Masses for Tuning with a User-Supplied Test Mix, on page 6-17.



To tune using process gases, continue to section 6.6.1.2.4, Selecting Masses
for Tuning with Process Gases, on page 6-17.



To tune with background gases, continue to section 6.6.1.2.5, Tuning with
Background Gases, on page 6-18.

6.6.1.2.1 Selecting Masses for Tuning with a CPM Test Mixture Calibration Reference
The optional CPM Test Mixture Calibration Reference is a calibrated leak-rate thatconsists of the chemical species shown in Table 6-4.
Table 6-4 CPM Test Mixture Composition

Gas Specie

Tune Masshydrogen (1%)

2helium (1%)

4nitrogen (1%)

28

argon (balance)

N/A

krypton

86

xenon

134



100 AMU sensors use masses 2, 4, 28 and 86 for tuning

200 AMU sensors use masses 2, 4, 28, 86 and 134 for tuning

300 AMU sensors cannot be fully tuned with the CPM Test Mixture
NOTE: Use the 200 AMU sensor masses for tuning from 1-200 AMU.
Another calibration reference will be required to tune the200-300 AMU mass range.

6 - 16

Transpector MPH Operating Manual

6.6.1.2.2 Selecting Masses for Tuning with an Argon Standard Calibration Reference
The argon standard calibration reference includes only argon. To tune with thisreference, the emission must be set to high (70 eV). This will generate peaks at
20 and 40. Do not tune mass 1, 2 or 4 if using the argon standard. Remove all of
the masses above mass 4 and add 20 and 40 then tune these masses.
NOTE: Argon calibration references are not recommended for tuning a 200 or 300
AMU Transpector MPH.
6.6.1.2.3 Selecting Masses for Tuning with a User-Supplied Test Mix
In some applications, it can be useful to have a test mix manufactured by a gas
supplier. The ideal mix would include the factory tune masses for the mass rangeof Transpector MPH to be tuned. The factory tune masses can be found in section
6.6.1.1 on page 6-15.
6.6.1.2.4 Selecting Masses for Tuning with Process Gases
In general, Transpector MPH tuning requires access to a low mass, a mid mass
and a high mass.
Do not tune mass 1 or 2 if hydrogen is not present in the process, but do not deletethem from the tune table.
Preferably, mass 4 should be tuned especially if Transpector MPH is used for leakchecking. One way of doing this would be to create a leak and spray in helium. This
will satisfy the low mass.
For a mid mass, try to use nitrogen or another mass in that area (water,
oxygen, etc.).
Tuning higher masses can be more difficult.


If the process does not contain gases with masses over 40 AMU, tune with
argon



If the process does contain gases with higher masses
Tune one between the mid mass and 100 AMU for 100 AMU sensors

Tune one mass between 100 and 200 AMU for 200 AMU sensors

Tune another mass above 200 AMU for 300 AMU sensors

6 - 17

Transpector MPH Operating Manual

6.6.1.2.5 Tuning with Background Gases
Mass 4 must be calibrated for proper leak detection. If Transpector MPH is used asa leak detector, make sure that helium is available for tuning. If Transpector MPH
is only used for leak checking, mass 4 is the only mass to tune. To tune mass 4,
find a way to introduce helium into the vacuum chamber.
The following procedure may be used if test mix or helium is not available.

1 Default all tune parameters.
2 Delete all masses except 1, 2, and 4.
3 Add mass 28 (or 40) and tune.
4 Delete mass 4.
5 Tune highest mass available in the system; in some cases this may be mass
40 or 44.

6 - 18Transpector MPH Operating Manual

Chapter 7
Diagnosing Problems
7.1 Introduction
If you are experiencing trouble with your Transpector MPH, first look at Table 7-1
and see if your problem is listed there. If not, contact INFICON (refer to section 1.3,
How To Contact Customer Support, on page 1-3).

7.2 Symptom-Cause-Remedy Chart
Make sure that the insulation on all cables is intact and there is no damage on theinsulating material before using Table 7-1.
Table 7-1 Symptom—Cause—Remedy chart

SYMPTOMCAUSE

REMEDYPower LED does notturn on+24 V external power supply

Check input AC line voltage
to external power supply.
Check +24 V input, verify
input between 20 - 30 V.
Replace power supply.

No communication to HOST
computerElectronics failure

Return to INFICON for repair.

Sensor IP address notcompatible with network

Refer to Chapter 2,
Connecting
Transpector MPH.

Transpector communications
port (port 80) is not open on
the host computer

Either open port 80 on thehost computer or change thecommunications port ofTranspector MPH.

Cable connections

Make sure cables areconnected to proper
connectors.

Host computer Ethernet card
malfunctioning

Replace Ethernet Card on
host computer.

7-1

Transpector MPH Operating Manual

Table 7-1 Symptom—Cause—Remedy chart (continued)

SYMPTOMEMISSION error (ColdStart, Warm Start)

CAUSE
Defective sensor filament
open, shorted

REMEDY
Check sensor with OHM
meter.
Replace sensor or filament.

ANODE error

Electronics failure

Return to INFICON for repair.

Insufficient vacuum

Verify pressure is less than
5E-4 Torr.

Sensor operating voltages
incorrect

Verify correct settings
Contact INFICON for
assistance.

Transpector MPH electronics
box not fully engaged on
sensorMake sure that theTranspector MPH electronics
module is pushed all the way
on sensor.

Defective sensor, anodeshortedCheck sensor with OHM
meter for shorts. See sensor
pin-out diagram.
Fix or replace sensor.

RF error

Electron MultipliererrorElectronics failure

Return to INFICON for repair.

Defective sensor, RF leads
open RF/DC card fault

Fix or replace sensor.

Electronics failure

Return to INFICON for repair.

Defective sensor, EM shorted

Check sensor with Ohm
meter. See sensor pin-out
diagram.
Fix or replace sensor.

7-2

EM just replaced

Verify that EM is plugged into
the HV pin properly.

Electronics failure

Return to INFICON for repair.

Transpector MPH Operating Manual

Table 7-1 Symptom—Cause—Remedy chart (continued)

SYMPTOM
Temperature error

CAUSE
Transpector MPH internalambient temp >70°C

REMEDY
Verify unit is installed
properly, ambient temp
<50°C.
Verify that there are no heatsources in local proximity.
Verify that internal fan isrunning.

Electronics failure

Return to INFICON for repair.

Total pressure plate current
exceeded trip threshold

Reduce pressure.

Total pressure plate is
contaminatedReplace ion source.

Excessive current (>2E-6
Amps)

Reduce pressure.

Electronics failure

Return to INFICON for repair.

Bad tune file

Retune RGA.

Contaminated quadrupole

Return to INFICON for repair.

Incorrect Ion source settings

Load original configuration
file.

Ion source contaminatedReplace Ion source.

EM voltage set too highReduce EM voltage.

Detector not working
correctly

Replace EM detector.

DSP
Communications
Error

Incorrect DSP response
detected

Reset electronics box.

DEC
Communications
Error

Incorrect DEC response
detected

Reset electronics box.

Overpressure

Electrometer Error

Mass Filter Error

Ion Source Error

Detector Error

Reduce EM voltage.

Return electronics box to
INFICON for repair.

Return electronics box to
INFICON for repair.

7-3

Transpector MPH Operating Manual

Table 7-1 Symptom—Cause—Remedy chart (continued)

SYMPTOM
Peakfind Error

CAUSE
No peak at target mass

REMEDY
Upload original configuration
file.
Return electronics box to
INFICON for repair.

Filament Potential
Error

Filament Current
Error

Focus Error

No spectra

Insufficient vacuum

Verify pressure is less than
5E-4 Torr.

Filament broken

Verify integrity of filament.

Filament shorted

Verify that filament is not
shorted to ground.

Insufficient vacuum

Verify pressure is less than
5E-4 Torr.

Filament broken

Verify integrity of filament.

Filament shorted

Verify that filament is not
shorted to ground.

Unable to start or maintain
Focus voltage

Reset electronics box.

Emission is OFF

Turn Emission ON.

EM is ON, when operating

Turn EM OFF.

Contaminated sensor

Degas, or service sensor.

Return electronics box to
INFICON for repair.

Replace sensor.

7-4Electronics failure

Return to INFICON for repair.

Pressure too low for FC

Use EM detector.

EM voltage too low

Increase voltage.

Transpector MPH electronics
box not fully engaged on
sensorPush Transpector MPH
electronics module
completely onto sensor.

Mass calibration

Adjust mass calibration.

Transpector MPH Operating Manual

Table 7-1 Symptom—Cause—Remedy chart (continued)

SYMPTOM
Poor
sensitivity

CAUSE
Sensor contaminated

REMEDY
Degas sensor.
Bake-out sensor.
Service sensor.

System pressure too low

Increase sample pressure, if
possible.

Mass calibration (resolution)

Adjust Mass Calibration,
increase peak width.

Sensor operating parameters
set wrong

Check settings of: electronenergy, ion energy, focus
emission current.

Improper calibration

Ensure that the total pressuregauge used for sensitivity
calibration was properly
calibrated.

Electronics failure

Return to INFICON for repair.

EM has low gain

Bake-out sensor.
Replace sensor.

Poor peak shapeSensor contaminatedDegas sensor.
Bake-out sensor.
Service sensor.

System pressure too highVerify pressure less than
5E-4 Torr forTranspector MPH.

Mass calibration required

Perform mass calibration.

Electronics failure

Return to INFICON for repair.

7-5

Transpector MPH Operating Manual

Table 7-1 Symptom—Cause—Remedy chart (continued)

SYMPTOMHigh noise
level

CAUSE

REMEDY

System grounding

Verify that vacuum system isgrounded.

Electronics failure

Return to INFICON for repair.

Transpector MPH electronics
box not mounted properly on
sensorPush Transpector MPH
electronics box all the way on
to the sensor.

EM defective

Replace EM assembly or
sensor.

Scan speed too fast for gain
setting

Increase dwell time.

7.3 Communication Problems
To correct communication problems, check the following:

7-6

Is the Ethernet cable connected to Transpector MPH and the host computer(either directly or through a router/switch)?



Does the Transpector MPH IP address have the same network prefix as thehost computer?



Is Port 80 open on the host computer?

Is there an IP address conflict between Transpector MPH and another network
device?



Refer to Chapter 2, Connecting Transpector MPH for more information oncommunications problems.

Transpector MPH Operating Manual

Chapter 8
Bibliography
For further information on partial pressure analyzers, see Partial Pressure
Analyzers and Analysis, M. J. Drinkwine and D. Lichtman, American Vacuum
Society Monograph Series, or A User’s Guide to Vacuum Technology, J. F.
O’Hanlon, John Wiley and Sons (1989). The latter book also contains a wealth of
information on related topics including gas flow, pressure gauges, pumps,
materials, and the design of vacuum systems.

8-1

Transpector MPH Operating Manual

Chapter 9
Glossary
Anode
The anode is the structure in the ion source in which ions are created byelectron impact. It can be formed from a mesh, such as in the open ion
source, or from a solid tube, such as in the closed ion source. Its electricalpotential is positive with respect to the filament, focus lens, total pressure
plate, pole zero, exit aperture and Faraday cup.
Appearance Potential
The minimum electron energy required to produce, by electron
bombardment, a given ion in its lowest energy state.
Atomic Mass Unit (AMU)
An atomic mass unit is a unit of measurement for the mass of a molecule
or ion. It is based on the definition that the mass of an atom of the
carbon-12 isotope is exactly 12.
BackgroundThe background is the residual atmosphere in a vacuum apparatus when
no gases are being deliberately introduced.
Bakeout
A bakeout is the process of heating a vacuum chamber above the ambient
temperature in order to accelerate the desorption of species such as water
vapor and hydrocarbons which are adsorbed onto the inner surfaces of thevacuum chamber.
Center Voltage
The center voltage is the DC potential to which the quadrupole rod RF anddifferential DC potentials are referenced.
Closed Ion Source (CIS)
The closed ion source is an ion source in which the pressure in theionization region is higher than in the rest of the analyzer sensor. This is
usually accomplished by fabricating the anode from a solid walled tube
instead of an open mesh. This type of source is usually employed tomeasure trace contaminant levels in a process gas.
ConductanceThe conductance of a gas flow channel is the ratio of the gas quantity
flowing through the channel to the pressure drop across that channel.
Cracking Pattern
See Fragmentation Pattern.

9-1

Transpector MPH Operating Manual

Detection Factor
The detection factor is the ratio of the detected signal for a given ion
current from a certain substance to the detected signal for the same ion
current of nitrogen ions as measured at mass 28. For Faraday cup
detectors, the detection factor is usually 1. For electron multiplierdetectors, this factor depends on the mass and chemical nature of the ion.
Detector
The detector is that part of the mass spectrometer sensor which convertsa beam of ions into an electrical signal.
Doubly Charged Ion
For positive ions, a doubly charged ion is a parent or fragment ion where
two electrons have been removed.
Electron Energy
The electron energy is the kinetic energy of the ionizing electrons in anelectron bombardment ion source and is typically measured in units ofelectron volts (eV). The electron energy is approximately equal to thedifference between the bias voltage on the filament and the anode
potential, times the electron charge.
Electron Multiplier
An electron multiplier is a in situ amplifier which is used to increase thesensitivity of a mass spectrometer. When a high voltage is applied to anelectron multiplier, positive ions are accelerated into the multiplier, causing
the release of a large number of electrons per incident ion at the output.
Emission Current
The emission current is the current of electrons leaving the surface of aheated filament.
Exit Aperture (Quadrupole)
The exit aperture is a focus lens at the ion exit (detector) end of aquadrupole mass spectrometer. This lens is often biased by a potentialthat is negative with respect to the quadrupole center voltage such thations are extracted from the exit end of the quadrupole and focused into thedetector.
Extractor
See Focus Lens.
Faraday Cup
The Faraday Cup is a detector for ions and/or electrons consisting of a cup
shaped, conductive electrode.
Filament
The filament is a fine wire or ribbon, which, when heated by means ofelectrical current, emits electrons. The filament typically made of iridiumwith a thorium or yttrium oxide coating, or of tungsten or a tungsten alloy.

9-2

Transpector MPH Operating Manual

Focus Lens
The focus lens is a conductive aperture located next to, and usually biased
negatively with respect to, the anode. Its purpose is to draw the ions out of
the anode, form them into a beam, and focus them into the next lenselement.
Fragment Ion
A fragment ion is an ion with fewer atoms than the parent gas moleculefrom which the ion is produced. The mass of the fragment ion is always
less than that of the parent ion.
Fragmentation Factor
The fragmentation factor is the fraction of the total ions produced from a
specified substance which have a given mass. The sum of thefragmentation factors for all of the ions produced from a specified
substance is equal to one.
Fragmentation Pattern
The fragmentation pattern is the pattern of ion masses and intensities
produced by electron bombardment of a specified gas species astransmitted by the mass filter, detected and recorded.
Gain (Electron Multiplier)
The gain of an electron multiplier is the ratio of incident ion current toelectron current output. The gain of the multiplier is a strong function of thebias potential applied across it.
Ion
An ion is a molecule or atom which has either lost or added one or more
electrons. Those molecules which have lost electrons are positive ions.
Those molecules which have added electrons are negative ions.
Ion Current
An ion current is the rate of flow of electrical charge associated with theflow of ions.
Ion Energy
The ion energy is the kinetic energy associated with a beam of ions. It isequal to the potential difference across which the ion beam is accelerated(or decelerated) times the charge on the ion, and is typically measured inelectron volts (eV). Specifically, in a quadrupole mass spectrometer, it is
the kinetic energy, along the axis, of the ions as they pass through themass filter. The ion energy is approximately equal to the anode potential
minus the quadrupole center voltage time the ionic charge.
Ion Source
The ion source is that part of a mass spectrometer in which neutral gas
molecules or atoms are ionized by electron bombardment.

9-3

Transpector MPH Operating Manual

Ionization Probability
The ionization probability for a chemical substance is the ratio of the total
ion current (at all masses) produced from a given partial pressure of that
substance, to the total ion current produced from nitrogen at the same
partial pressure.
Isotope
The atom is composed of nucleus protons and neutrons surrounded by anelectron cloud. The chemical properties of an element are determined by
the number and arrangement of electrons (with -1 charge) in an atom. The
number of electrons in a neutral atom in turn depends on the number ofprotons (with +1 charge) within the nucleus of that atom. Atomic nuclei
also contain neutrons which, being uncharged, do not affect the chemistryof an element. Protons and neutrons have approximately the same mass,
which is approximately 1,800 times the mass of an electron. All atoms of agiven element have the same number of protons but not necessarily thesame number of neutrons. Atoms of the same element which have a
different number of neutrons are called isotopes. See also Natural
Abundance.
Linearity
Linearity is the mathematical relationship between an ion current and thetotal or partial pressure giving rise to that current. A mass spectrometer issaid to have good linearity when the ion current is proportional to thepressure over a specified pressure range within a specified tolerance.
Typically (but not always), the ion current will be linear with pressure at thelow end of an instrument’s pressure range. At some pressure near thehigh pressure end of an instrument’s range, the ion current will be lessthan proportional to the pressure.
Mass to Charge Ratio
The mass to charge ratio is ratio of the mass of an ion to its charge,
usually expressed in atomic mass units per unit electron charge.
Mass Filter
The mass filter is that part of the mass spectrometer which separates abeam of ions by their mass to charge ratios.
Mass Spectrometer
A mass spectrometer is an instrument which ionizes a gas sample,
separates the resulting beam of ions by mass to charge ratio, and detects
the filtered ions as an electrical signal.
Mass Spectrum
A mass spectrum is a record of ion current as a function of mass to charge
ratio obtained with a mass spectrometer. The spectrum can be presented
as a graph with mass to charge ratio on the X-axis and ion current on the
Y-axis, or as a tabular listing of ion currents and the associated mass tocharge ratios.

9-4

Transpector MPH Operating Manual

Material Factor
The material factor for a chemical substance is that part of the
proportionality constant between the partial pressure of that substanceand the resulting mass filtered ion current which depends on the chemical
nature of that substance but not the particular instrument used for thatmeasurement. The material factor is a function of the ionization probability
and fragmentation factor for the specified substance.
Mean-Free-Path
The mean-free-path is the average distance an ion, electron, atom, or
molecule can travel before colliding with an ambient gas molecule. The
mean free path is inversely proportional to the pressure.
Molecular Flow
Molecular flow is that motion of gas molecules wherein the collisionalmean free path is greater than the critical dimension of a flow constraining
element such as an orifice of tube diameter. The gas flow characteristics
are dominated by collisions between the gas molecules and theappropriate surfaces of the vacuum system.
Natural Abundance
The natural abundance of an isotope is the average percentage of all
atoms of a given element which have the same number of neutrons. For
example, 99.985% of all naturally occurring hydrogen atoms have noneutrons, giving an atomic mass of approximately 1, while 0.015% have
one neutron, giving an atomic mass of approximately 2. There is a thirdisotope of hydrogen which contains two neutrons, giving an atomic massof 3, but this isotope is unstable with such a short radioactive half life that it
is not normally naturally occurring in any significant quantity on earth.
There are occasions when an observed isotopic abundance will not reflect
the natural abundance. For instance, in semiconductor processing tools
know as ion implanters, it is not unusual for the BF3 boron dopant source
to be isotopically enriched to 99%+ of the boron-11 isotope (instead of thenaturally occurring 80.22%).
Open Ion Source (OIS)
An open ion source is an ion source constructed with an open grid
structure with high conductance between the ionization region and thevacuum region surrounding it. Residual gas analyzers are typicallyequipped with this type of ion source.
Outgassing
Outgassing is the evolution of gas which was dissolved in or adsorbed onsolid surfaces inside a vacuum chamber.
Parent Ion
A parent ion is an ion made by removing a single electron from theoriginal, or parent, gas molecule, and therefore has the same mass.

9-5

Transpector MPH Operating Manual

Partial Pressure
The partial pressure is the pressure of a specific chemical component of agas mixture. The sum of all the partial pressures is the total pressure.
Pole Zero
See Center Voltage.
Quadrupole
A quadrupole is a mass filter consisting of four parallel electrodes or poles(hence quadrupole) arranged in a square array. Opposite poles areconnected together electrically such that an electric field of hyperbolic
geometry is produced. The potentials applied to these poles are asuperposition of variable DC and RF voltages, generally of fixed RF
frequency.
Repeller (Electron)
The electron repeller is an electrode located on the opposite side of thefilament than the anode. The repeller is usually biased at the samepotential as the negative side of the filament, or a more negative potential.
Residual Gas Analyzer
A residual gas analyzer is an instrument which is used to determine thequantities and chemical nature of gases present in a vacuum system. The
instrument is typically a mass spectrometer equipped with an open ion
source.
Resolution
Resolution is the ability of a mass filter to select between nearby masses.
It is typically measured as the mass of the peak divided by the width of agiven mass peak at 10% or 50% of the peak maximum intensity.
Secondary Electron
A secondary electron is an electron emitted from a surface when that
surface is struck by a sufficiently energetic ion, electron, neutral moleculeor photon.
Sensitivity
The sensitivity of a mass spectrometer is the ratio of ion current at a
specified mass from a specified gas to the partial pressure of that gas,
suitably corrected for background. The specified gas is typically nitrogen,measured at 28 AMU, although argon at 40 AMU is sometimes usedinstead, depending on the instrument.
Total Pressure
The total pressure is the force per unit area exerted by a gas on the wallsof its container. It is equal to the sum of all the partial pressures of thedifferent chemical species which comprise that gas.

9-6

Transpector MPH Operating Manual

Total Pressure Plate
The total pressure plate, or collector, is an electrode in the ion source on
which at least a part of the ion beam impinges. The current striking thisplate is a function of the total pressure in the ion source.
Transition Flow
Transition flow is that motion of gas molecules wherein the collisionalmean free path is approximately the same as the critical dimension of aflow constraining element such as an orifice of tube diameter.
Transmission Factor
The transmission factor is the ratio of ion current detected at the exit endof the mass filter (set to transmit a given mass) to the current of ions of thesame mass entering the filter from the ion source. Typically, thetransmission factor for nitrogen ions at 28 AMU is set equal to 1. The
transmission factor at other masses is given relative to that for nitrogen.
Viscous Flow
Viscous flow is that motion of gas molecules wherein the collisional mean
free path is less than the critical dimension of a flow constraining element
such as an orifice of tube diameter. The gas flow characteristics are
dominated by collisions between gas molecules.
Zero Blast
Zero blast is the ion current which is not mass filtered and is detected
when the mass spectrometer is scanning near mass zero.

9-7

Transpector MPH Operating Manual

Chapter 10
Transpector MPH Accessories and Spare Parts
10.1 Introduction
Transpector MPH has several accessories and spare parts for purchase. Thissection lists these parts and provides their INFICON part numbers.

10.2 MPH Accessories
Table 10-1 MPH accessories

Part Number

Description

600-1428-P1

Power Supply Extension Cable 4.5 m (15 ft.)

600-1429-P1

Power Supply Extension Cable 9 m (30 ft.)

961-417-G1

4-Port Ethernet Router w/ Push Button Wi-Fi

961-418-G1

8-Port Ethernet Switch

961-702-G1

Sensor Hardware Kit

914-024-G1

Angle Valve Kit, Manual (includes heater)

914-026-G1

Angle Valve Kit, Air Operated, 24 V(dc) (includes heater)

914-410-P1

Spare Angle Valve, Manual

914-220-G1

Spare Angle Valve, Electropneumatic

961-029-G1

MPH Heater Kit 120 V(ac)961-033-G1

Pirani Interlock Kit

961-705-G1

Argon Calibration Reference Kit

961-708-G1

CPM Test Mix Calibration Reference Kit

961-433-G1

MPH Heater Jacket Mount Kit

10 - 1

Transpector MPH Operating Manual

10.3 Transpector MPH Spare Parts
10.3.1 Preventative Maintenance Parts
Table 10-2 Transpector MPH preventative maintenance parts

Part Number

Description

961-700-G1

Filament kit - Dual Yttria-Coated Iridium Filaments

961-700-G2

Filament kit - Dual Tungsten Filaments

961-701-G1

Ion source kit - Dual Yttria-Coated Iridium Filaments

961-701-G2

Ion source kit - Dual Tungsten Filaments

961-707-G1

Electron Multiplier Kit

10.3.2 Replacement Spare Parts
Table 10-3 Transpector MPH replacement spare parts

10 - 2

Part Number

Description

961-022-G1

Spare O-ring and Nut Kit (for connection between box and sensor)

961-206-G2

Transpector MPH EM/FC Extension Tube Kit (including nuts/bolts)

924-200-G1

Transpector MPH HPR/Interlock Extension Tube Kit (Including
nuts/bolts)

600-1190-P8

Communications Cable Ethernet 7 m

600-1190-P15

Communications Cable Ethernet 15 m

961-021-G1

Power Supply Kit: 80-250 V(ac), 1.2 m (4 ft.) US Plug

961-021-G2

Power Supply Kit: 80-250 V(ac), 1.2 m (4 ft.) US Plug,4.57 m (15 ft.) Extension

961-021-G3

Power Supply Kit: 80-250 V(ac) 4 ft. (1.2 m) US Plug,9.14 m (30 ft.) Extension

961-021-G4

Power Supply Kit: 80-250 V(ac) 1.2 m (4 ft.) European Plug

961-021-G5

Power Supply Kit: 80-250 V(ac) 1.2 m (4 ft.) Euro 4.57 m (15 ft.)
Extension

961-021-G6

Power Supply Kit: 80-250 V(ac) 1.2 m (4 ft.) Euro 30 ft. Extension

961-416-P1

Spare MPH Heating Jacket (requires heater power cable)

914-407-P1

Spare Valve Heating Jacket (requires heater power cable)

600-1487-P1
068-0433

Heater Power Cable, 120 V(ac)AC Power Cord, 120 V(ac)600-1487-P2
068-0434

Heater Power Cable, 230 V(ac)Ac Power Cord, 230 V (ac)Transpector MPH Operating Manual

10.3.3 Spare Transpector MPH Electronics Boxes
Table 10-4 Spare Transpector MPH electronics boxes

Part Number

Description

MP-H10S

Transpector MPH 100 AMU FC or EM/FC (MPH100F, MPH100M) w/
Ethernet

MP-H20S

Transpector MPH 200 AMU FC or EM/FC (MPH200F, MPH200M) w/
Ethernet

MP-H30S

Transpector MPH 300 AMU FC or EM/FC (MPH300F, MPH300M) w/
Ethernet

10.3.4 Spare Transpector MPH Sensors
Table 10-5 Spare Transpector MPH sensors

Part Number

Description

961-H1FASTranspector MPH 100 AMU FC (MPH100F) Y2O3/Ir Filaments

961-H1MAS

Transpector MPH 100 AMU EM/FC (MPH100M) Y2O3/Ir Filaments

961-H1FBS

Transpector MPH 100 AMU FC (MPH100F) Tungsten Filaments

961-H1MBS

Transpector MPH 100 AMU EM/FC (MPH100M) Tungsten Filaments

961-H2FASTranspector MPH 200 AMU FC (MPH200F) Y2O3/Ir Filaments

961-H2MAS

Transpector MPH 200 AMU EM/FC (MPH200M) Y2O3/Ir Filaments

961-H2FBS

Transpector MPH 200 AMU FC (MPH200F) Tungsten Filaments

961-H2MBSTranspector MPH 200 AMU EM/FC (MPH200M) Tungsten Filaments

961-H3FAS

Transpector MPH 300 AMU FC (MPH300F) Y2O3/Ir Filaments

961-H3MAS

Transpector MPH 300 AMU EM/FC (MPH300M) Y2O3/Ir Filaments

961-H3FBS

Transpector MPH 300 AMU FC (MPH300F) Tungsten Filaments

961-H3MBS

Transpector MPH 300 AMU EM/FC (MPH300M) Tungsten Filaments

10 - 3

Transpector MPH Operating Manual

Chapter 11
Specifications
11.1 Introduction
The following sections detail the specifications for the Transpector MPH Gas
Analysis System. As a result of INFICON continuing product improvement andquality assurance programs, these specifications are subject to change without
notice or obligation.
NOTE: All specifications are measured after a 30 minute warm-up period atconstant STP unless specified.

11.2 Sensor Length (Vacuum Side)
MPH100F

MPH100M

MPH200F

MPH200M

MPH300F

MPH300M

143 mm

193 mm

143 mm

193 mm

143 mm

193 mm

(5.63 in.)(7.82 in.)(5.63 in.)(7.82 in.)(5.63 in.)(7.82 in.)

MPH100M

MPH200F

MPH200M

MPH300F

MPH300M

11.3 Mass Range
MPH100F

1 to 100 AMU

1 to 200 AMU

1 to 300 AMU

11.4 Detector Type

11 - 1

MPH100F

MPH100M

MPH200F

MPH200M

MPH300F

MPH300M

Faraday Cup

Continuous
DynodeElectronMultiplier /Faraday Cup

Faraday Cup

Continuous
DynodeElectronMultiplier /Faraday Cup

Faraday Cup

Continuous
DynodeElectronMultiplier /Faraday Cup

Transpector MPH Operating Manual

11.5 Resolution
Peak Width (AMU) at 10% of peak height
MPH100F

MPH100M

MPH200F

MPH200M

MPH300F

MPH300M

0.9 AMU

11.6 Temperature Coefficient
During an eight hour period, after thirty minutes of warm up
MPH100F

MPH100M

MPH200F

MPH200M

MPH300F

MPH300M

For FC Only—Less than 1% of peak height per °C

11.7 Sensitivity
Amps/Torr [mbar] (Pa)FC

MPH100F

MPH100M

MPH200F

MPH200M

MPH300F

MPH300M

6x10-4[4.5x10-4](4.5x10-6)

6x10-4[4.5x10-4](4.5x10-6)

5x10-4[3.8x10-4](3.7x10-6)

5x10-4[3.8x10-4](3.7x10-6)

4x10-4[3x10-5](3x10-6)

4x10-4[3x10-5](3x10-6)

11.8 Minimum Detectable Partial Pressure
Torr [mbar] (Pa)MPH100F

MPH100M

MPH200F

MPH200M

MPH300F

MPH300M

FC

3x10-13[4x10-13](4x10-11)

N/A

4x10-13[5.3x10-13](5.3x10-11)

N/A

5x10-13[6.7x10-13](6.6x10-11)

N/A

EM

N/A

2x10-15[2.7x10-15](2.6x10-13)

N/A

3x10-15[4x10-15](5.3x10-13)

N/A

4x10-15[5.3x10-15](5.3x10-13)

MPH300F

MPH300M

11.9 Zero Blast Interference at Mass 2
ppm
MPH100F

MPH100M<5 ppm

MPH200F

MPH200M<65 ppm<100 ppm

11 - 2

Transpector MPH Operating Manual

11.10 Maximum Operating Pressure
Torr [mbar] (Pa)MPH100F

MPH100M

MPH200F

MPH200M

MPH300F

MPH300M

5x10-4[6.7x10-4](6.7x10-2)

11.11 Maximum Sensor Operating Temperature
Degrees C
MPH100F

MPH100M

MPH200F

MPH200M

MPH300F

MPH300M

FC

200°C

200°C

200°C

200°C

200°C

200°C

EM

N/A

150°C

N/A

150°C

N/A

150°C

MPH300F

MPH300M

MPH300F

MPH300M

MPH300F

MPH300M

11.12 Maximum Bakeout Temperature
Degrees C — with electronics removed
MPH100F

MPH100M

MPH200F

MPH200M
300°C

11.13 Operating Temperature
MPH100F

MPH100M

MPH200F

MPH200M

5 to 50°C ambient

11.14 Power Input
MPH100F

MPH100M

MPH200F

MPH200M

20-30 V(dc), 24 V(dc) Typical, Latching, 4-pin Din connector,
internally isolated from system ground11 - 3

Transpector MPH Operating Manual

11.15 Ethernet Communication Interface
MPH100F

MPH100M

MPH200F

MPH200M

MPH300F

MPH300M

Standard: Cat5e Ethernet Cable Connection

11.16 Relay Outputs
MPH100F

MPH100M

MPH200F

MPH200M

MPH300F

MPH300M

MPH300F

MPH300M

H300F

H300M

1 relay, 24 V at 0.5 amps

11.17 Inputs
MPH100F

MPH100M

MPH200F

MPH200M

1 Analog Input, 2 Digital Inputs

11.18 Indicators (Green)
H100F

H100M

H200F

H200M

1 for power status, 1 for emission status

11 - 4

Transpector MPH Operating Manual

Chapter 12
Supplied Items
12.1 Introduction
You will receive the following:

A Ship Kit. See section 12.1.1 on page 12-1.

An Electronics Module. See section 12.1.2 on page 12-2.

A Sensor. See section 12.1.4 on page 12-2.

An Extension Kit. See section 12.1.5 on page 12-3.

An Electronics Module Power Supply. See section 12.1.3 on page 12-2.

Software (optional). See section 12.1.6 on page 12-4.

A Computer Cable.
See section 12.1.7, Heating Jacket System (Optional), on page 12-4.

12.1.1 Ship Kit
Table 12-1 Ship kit

Part Number

Description

961-020-G1

Ship Kit

includes:12 - 1600-1198-P8

7 m Ethernet Cable

961-702-G1

Mounting Hardware

961-022-G1

O-ring and Mounting Nut

961-370-P1

O-ring Removal Tool

051-032

D Connector

051-1082

Cable Clamp for D connector

074-5007-G1

Gas Analysis Manuals CD

Transpector MPH Operating Manual

12.1.2 Electronics Module
Table 12-2 Electronics module(one of the following)
Part Number Description
MP-H10P

Transpector MPH 100 AMU FC and EM/FC Electronics Box

MP-H20P

Transpector MPH 200 AMU FC and EM/FC Electronics Box

MP-H30P

Transpector MPH 300 AMU FC and EM/FC Electronics Box

12.1.3 Power Supply
Table 12-3 Power supply

Part Number

Description

961-021-G1

Power Supply Kit - 85-250 V(ac) 1.2 m (4 ft.)US Plug

961-021-G2

Power Supply Kit - 85-250 V(ac) 1.2 m (4 ft.)US Plug with 4.5 m (15 ft.) Extension

961-021-G3

Power Supply Kit - 85-250 V(ac) 1.2 m (4 ft.)US Plug with 9 m (30 ft.) Extension

961-021-G4

Power Supply Kit - 85-250 V(ac) 1.2 m (4 ft.)
European Plug

961-021-G5

Power Supply Kit - 85-250 V(ac) 1.2 m (4 ft.)
Euro Plug with 4.5 m (15 ft.) Extension

961-021-G6

Power Supply Kit - 85-250 V(ac) 1.2 m (4 ft.)
Euro Plug w/ 9 m (30 ft.) Extension

12.1.4 Sensor
Table 12-4 Sensor(one of the following):
Part Number

Description

961-H1FAPTranspector MPH100F Y2O3/Ir Filaments

961-H1MAP

Transpector MPH100M Y2O3/Ir Filaments

961-H1HAPTranspector MPH100 HPR Y2O3/Ir Filaments

961-H1PAPTranspector MPH100 Interlock Y2O3/Ir Filaments

961-H2FAPTranspector MPH200F Y2O3/Ir Filaments

961-H2MAP

Transpector MPH200M Y2O3/Ir Filaments

12 - 2

Transpector MPH Operating Manual

Table 12-4 Sensor (continued)(one of the following):
Part Number

Description

961-H2HAPTranspector MPH200 HPR Y2O3/Ir Filaments

961-H2PAPTranspector MPH200 Interlock Y2O3/Ir Filaments

961-H3FAPTranspector MPH300F Y2O3/Ir Filaments

961-H3MAP

Transpector MPH300M Y2O3/Ir Filaments

961-H3HAPTranspector MPH300 HPR Y2O3/Ir Filaments

961-H3PAP

Transpector MPH300 Interlock Y2O3/Ir Filaments

961-H1FBPTranspector MPH100F Tungsten Filaments

961-H1MBPTranspector MPH100M Tungsten Filaments

961-H1HBPTranspector MPH100 HPR Tungsten Filaments

961-H1PBP

Transpector MPH100 Interlock Tungsten Filaments

961-H2FBPTranspector MPH200F Tungsten Filaments

961-H2MBPTranspector MPH200M Tungsten Filaments

961-H2HBP

Transpector MPH200 HPR Tungsten Filaments

961-H2PBP

Transpector MPH200 Interlock Tungsten Filaments

961-H3FBP

Transpector MPH300F Tungsten Filaments

961-H3MBPTranspector MPH300M Tungsten Filaments

961-H3HBP

Transpector MPH300 HPR Tungsten Filaments

961-H3PBP

Transpector MPH300 Interlock Tungsten Filaments

12.1.5 Extension Kit
Table 12-5 Extension kit(one of the following)

12 - 3

Part Number

Description

961-206-G2

Transpector MPH Sensor Extension Kit

961-205-G2

Transpector MPH HPR/Interlock Sensor Extension Kit

Transpector MPH Operating Manual

12.1.6 Software
Software packages are optional and available for Windows only.
Table 12-6 Software(one of the following) (optional)
Part Number

Description

921-039-G1

FabGuard Explorer Single Sensor Version - CD

921-039-G2

FabGuard Explorer Multi Sensor Version - CD

12.1.7 Heating Jacket System (Optional)
Table 12-7 Heating jacket system (optional)(one of the following) (optional)
Part Number

Description

961-029-G1

Transpector MPH Heater Kit - 120 V(ac)961-029-G2

Transpector MPH Heater Kit - 230 V(ac)12.1.8 Calibration Reference (Optional)
Table 12-8 Calibration reference (optional)(one of the following) (optional)
Part Number Description
923-713-G1

Argon Only Reference

923-713-G2

Factory Test Mixture (includes 1% of H2, He, N2, Kr and Xe withthe remainder Ar)

12.1.9 Interlock Kit (Optional)
Table 12-9 Interlock Kit (Optional)(optional)
Part Number

Description

961-702-G1

Transpector MPH Pirani Interlock Kit

12 - 4

Transpector MPH Operating Manual

12.1.10 Angle Valve (Optional)
Table 12-10 Angle valve (optional)(optional)

12 - 5

Part Number

Description

914-024-G1

Angle Valve Kit, Manual (includes Heater)Transpector MPH Operating Manual

Index
A
altitude range 1-8
analyzer factor 4-9, 4-12
anode 9-1
error 7-2
voltage 3-7
anti-seize compound 1-11
appearance potential 9-1
atomic mass unit 9-1

B
background 9-1
bakeout 9-1, 11-3
temperature 6-3Ccalibrated 4-16
capacitance manometer 4-11
center voltage 9-1
closed ion source 4-15, 9-1
communication
none to host 7-1
problems 7-6
computercables 12-4
conductance 9-1
ConFlat flange
assembly 1-10
constant peak width 4-15
contamination
prevention 3-13
continuous dynode element 3-12
control voltages 4-15
CPU LED 7-1
cracking pattern 4-3, 9-1
current rating 1-7
Customer Support
Return Material Authorization 1-3

D
Dalton’s Law 4-8
DCcomponent 3-7
potential 3-7
DC-to-RF ratio 3-7
Declaration Of Contamination 1-3
detection factor 4-12, 4-13, 9-2
detector 3-1, 9-2
detector type 11-1

doubly charged ion 9-2

Eelectron energy 3-4, 9-2
electron multiplier 9-2
electron stimulated desorption 4-15
electronics enclosure 11-4
electronics module 1-5, 12-2
physical dimensions 1-6
EM gain 3-11
emission current 3-4, 9-2
emission error 7-2
emult error 7-2
energy of the bombarding electrons 4-5
exit aperture 9-2
extension kit 12-3
extractor 3-4, 9-2

Ffaradaycup 3-10, 9-2
filament 4-14, 9-2
kit 10-2
replacement 6-6
focus lens 9-3
fragment ion 9-3
fragmentation factor 4-9, 4-13, 4-16, 9-3
fragmentation pattern 4-3, 4-5, 4-6, 4-15, 9-3

Ggain of the electron multiplier 4-12, 9-3
gas consumption 4-15
gas phase patterns 4-15

H
heating jacket 6-3
high-vacuum environment 3-1
humidity 1-8hydrogen fluoride 3-13

I
I/O 1-23
analog inputs 1-24
AUX I/O connector 1-23
setpoint relays 1-23
in situ preamplifier 3-11
inputs 11-4
integer values 4-3
ion 9-3

Index - 1

Transpector MPH Operating Manual

beam focus 3-4
cage 3-4
current 3-10, 9-3
detector 3-10
doubly charged 4-3
energy 3-7, 9-3
intensity 4-1
low mass 3-7
mass-to-charge ratio 4-1
multiply charged 4-6
parent 4-3, 9-5
remove high mass 3-7
source 1-5, 3-1, 3-2, 4-14, 9-3
source assembly kit 10-2
source removal 6-9, 6-11
total yield 4-15
ion detector 1-5
ionization probability 4-9, 4-11, 4-13, 9-4
ionizer 4-14
isotope 9-4
isotope ratios 4-4, 4-6

analyzer 4-8
pass band width 3-8
peak height 4-8
peak shape, poor 7-5
perimeter for maintenance access 1-7
pole zero 3-7, 9-6
pollution degree 1-8
power
input 11-3
supply 1-15, 12-2
pressure maximum 11-2
pumping 4-14

Lreactive fluorides 3-13
relay outputs 11-4
repeller (electron) 9-6
required vacuum 1-8
residual gas analyzer 9-6
resolution 3-8, 9-6, 11-2
RFamplitude 3-7
error 7-2
frequency 3-7
potential 3-7
RS232
setting up 1-15
specifications 11-4
RS485
specifications 11-4

LED indicators 11-4
lighter elements 4-4
linearity 9-4

Mmass discrimination 4-15
mass filter 3-1, 3-6, 9-4
mass range 11-1
mass spectrometer 9-4
mass spectrum 3-8, 4-1, 9-4
mass to charge ratio 9-4
material factor 4-9, 9-5
mean-free-path 9-5
molecular flow 9-5
mounting requirements 1-7
multiple peaks 4-3

Nnatural abundance 9-5
nitrogen trifluoride 3-13
noise level 7-6

Oopen ion source 9-5
outgassing 4-14, 9-5
overvoltage category 1-8

Pparent ion 9-5
partial pressure 4-13, 4-16, 9-6

Index - 2Q
quadrupole 9-6
exit aperture 3-10
exit lens 3-10
mass filter 1-5
partial pressure analyzer 1-4
radius 3-6, 3-7

RS
secondary electron 9-6
sensitivity 4-12, 4-15, 9-6, 11-2
poor 7-5
sensor 1-5, 12-2
bakeout temperature 1-13
cleaning 1-9
contaminated 6-1
length 11-1
max operating temp 11-3
mounting near magnetic fields 1-11
ship kit 12-1
software 12-4
spectra 4-1

Transpector MPH Operating Manual

none 7-4
spinning rotor gauge 4-11
supply voltage 1-7
surface film 3-13

T
temperature
bakeout 11-3
coefficient 11-2
error 7-3
max operating 11-3
operating 11-3
operating range 1-8
total pressure 9-6
total pressure plate 9-7transition flow 9-7
transmission factor 4-12, 4-13, 9-7
tuned 4-16
tungsten hexafluoride 3-13

Uultrahigh vacuum 4-14
user configured switches 11-4

Vvacuum region 4-14
vacuum system 4-14
ventilation requirements 1-7
viscous flow 9-7

W
weight 1-6

Zzero blast 9-7

Index - 3

Transpector MPH Operating Manual®
www.inficon.com

re achus@inficon.com

Due to our continuing program of product improvements, specifications are subject to change without notice.
All trademarks are the property of their respective owners.
PN 074-555-P1C©2016 INFICON