Operating Manual

Incl. EU Declaration of Conformity

Vacuum Switch
VSA100A

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1

Product Identification

In all communications with INFICON, please specify the information on the productnameplate.

ValidityThis document applies to products with part number:
399-001
The part number (PN) can be found on the product nameplate.
We reserve the right to make technical changes without prior notice.
All dimensions are indicated in mm.
The references to diagrams, e.g. (4/5), consist of the fig. no. and the item no. inthat order.

Description

The Vacuum Switch VSA100A is used as a pressure safety switch in vacuum
systems.

Intended Use

The Vacuum Switch VSA100A is used as a pressure safety switch in vacuum
systems. It is used e.g. to automatically interrupt the gas supply when venting
vacuum systems with a purge gas at a pressure of 3 mbar below atmosphericpressure.

Unpacking and Checking

Unpack the Vacuum Switch VSA100A immediately after delivery, even if it is to beput into operation at a later date.
Before doing so, examine the shipping container for any external damage. Thencompletely remove the packaging materials.
The shipping container and packaging materials must be kept in the event of complaints about damage.
In order to ensure that no damages have been caused during transport carefully
examine Vacuum Switch VSA100A visually.
If any damage is discovered, report it immediately to the forwarding agent andinsurer. If the damaged part has to be replaced, please get in touch with the orders
department.

Design and Function

2

At a differential pressure of 6 mbar when pumping down or 3 mbar when venting
below atmospheric pressure, an elastic diaphragm actuates a changeover contact
which in turn may be used to directly switch any ancillary equipment. The electricalconnections are placed under a plastic cover.

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Contents
Product Identification
Validity
Description
Intended Use
Unpacking and Checking
Design and Function

222222

1 Safety
1.1 Symbols Used
1.2 Personnel Qualifications
1.3 General Safety Instructions
1.4 Liability and Warranty

44444

2 Technical Data

53 Installation
3.1 Vacuum Connection
3.2 Electrical Connection
3.3 Start up

66664 Maintenance

75 Returning the Product76 Disposal8EU Declaration of Conformity

9UKCA Declaration of Conformity

10For cross-references within this document, the symbol (→  XY) is used.

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31 Safety
1.1 Symbols Used
Symbols for residual risks

DANGER
Information on preventing any kind of physical injury.

WARNING
Information on preventing extensive equipment and environmental damage.

CautionInformation on correct handling or use. Disregard can lead to malfunctions or
minor equipment damage.
Notice

1.2 Personnel Qualifications

Skilled personnel
All work described in this document may only be carried out by persons whohave suitable technical training and the necessary experience or who have been
instructed by the end-user of the product.

1.3 General Safety
Instructions•

Adhere to the applicable regulations and take the necessary precautions for theprocess media used.
Consider possible reactions between the materials (→  5) and the process
media.

•

Adhere to the applicable regulations and take the necessary precautions for all
work you are going to do and consider the safety instructions in this document.

•Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

Communicate the safety instructions to other users.

1.4 Liability and Warranty

4INFICON assumes no liability and the warranty becomes null and void if the enduser or third parties•

disregard the information in this document•

use the product in a non-conforming manner•

make any kind of changes (modifications, alterations etc.) to the product•use the product with accessories not listed in the corresponding productdocumentation.

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2 Technical Data
Switching pressure
Return switching pressure
Switching inaccuracy
Max. operating pressure (abs.)
Operating temperature
Helium permeation
Switching contact
Switching capacity
Electrical connection
Vacuum connection
Protection type
Materials in contact with the medium
Internal volume
Weight6 mbar(below atmospheric pressure)
3 mbar(below atmospheric pressure)±2 mbar2000 mbar
0 to 85 °C<5·10-5 mbar·l·s-1
changeover contact
100 mA / 24 V (ac)
30 mA / 24 V (dc)standard cable 3 m
DN 16 KF
IP44
stainless steel 1.4305, 1.4310
stainless steel 1.4300 PTFE coated
EPDM2 cm3315 g

Dimensions [mm]Fig. 1 Dimensional diagram VSA100A

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3 Installation

3.1 Vacuum Connection

The VSA100A is connected to the vacuum system via a DN 16 KF small flange.
The VSA100A should preferably be mounted standing on its flange. Inclined
mounting is also permissible, including the horizontal position. Downward installation is not permissible because in such a case condensate may collect in the pressure switch. This affects the measurements and may damage the pressure switch.

3.2 Electrical Connection

Fig. 2 Contact assignment of microswitch
The contact assignment is given in Fig. 2.
The VSA100A is supplied with a connected 3 m long standard cable. The length of
this cable may be changed.
The electrical connection terminals and the strain relief are accessible after unscrewing the cross head screws and folding out the cap.
The contacts at the VSA100A are marked 1, 2 and 3 (see contact assignment
Fig. 2).
The supply line has to be fuse-protected with max. 100 mA by the end-user.
Adhere to the applicable regulations and take the necessary precautions for all
work you are going to do.

3.3 Start up

6When leak detecting with a helium leak detector, spraying the pressure switch withhelium may result in a helium proof. This is in general not due to a leak of theVSA100A, but is permeation of helium through the EPDM diaphragm.

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4 Maintenance

The VSA100A requires no maintenance

5 Returning the ProductWARNING
Forwarding contaminated products
Products returned to INFICON for service or repair should preferably
be free of harmful substances (e.g. radioactive, toxic, caustic or
microbiological).
Adhere to the forwarding regulations of all involved countries andforwarding companies and enclose a completed declaration of contamination (Form under www.inficon.com).
Products that are not clearly declared as "free of harmful substances" are decontaminated at the expense of the customer.
When returning a product to INFICON, put it in a tight and impact resistantpackage.

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6 Disposal
DANGER
Contaminated parts
Contaminated parts can be detrimental to health.
Before beginning to work, find out whether any parts are contaminated. Adhere to the relevant regulations and take the necessary
precautions when handling contaminated parts.

WARNING
Substances detrimental to the environment
Electronic components must be disposed of in accordance with special
regulations.
Dispose of such products in accordance with the relevant local regulations.

Separating the components

8

After disassembling the product, separate its components according to the following criteria:

Contaminated components

Contaminated components (radioactive, toxic, caustic, or biological hazard etc.)
must be decontaminated in accordance with the relevant national regulations,separated according to their materials, and recycled.

Other components

Such components must be separated according to their materials and recycled.

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EU Declaration of Conformity
Manufacturer:

INFICON AG, Alte Landstraße 6, LI-9496 Balzers

This declaration of conformity is issued under the sole responsibility of themanufacturer.
Product:

Vacuum Switch
VSA100A

The product of the declaration described above is in conformity with following
Union harmonization legislation:•2014/35/EU, OJ L 96/357, 29.3.2014•2011/65/EU, OJ L 174/88, 1.7.2011(Low Voltage Directive; Directive relating to electrical equipment designed for use within certain
voltage limits)(RoHS Directive; Directive on the restriction of the use of certain hazardous substances in electricaland electronic equipment)

Harmonized and international/national standards and specifications:•

EN 60730-2-6:2016•

EN IEC 63000:2018(Requirements for automatic electrical pressure sensing controls)(Technical documentation for the assessment of electrical and electronic products with respect to therestriction of hazardous substances)

Signed for and on behalfof:

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INFICON AG, Alte Landstraße 6, LI-9496 Balzers

Balzers, 2024-01-02

Balzers, 2024-01-02

Rolf Enderes
Director Development & Software

Philip Kuntner
Product Manager9

UKCA Declaration of Conformity
Manufacturer:

INFICON AG, Alte Landstraße 6, LI-9496 Balzers

This declaration of conformity is issued under the sole responsibility of themanufacturer.
Product:

Vacuum Switch
VSA100A

The product of the declaration described above is in conformity with the relevant
UK Statutory Instruments:••S.I. 2016/1101, 11.2016(The electrical equipment (safety) regulations 2016)

S.I. 2012/3032, 12.2012(The restriction of the use of certain hazardous substances in electrical and electronic equipment
regulations 2012)

Harmonized and international/national standards and specifications:•EN 60730-2-6:2016•EN IEC 63000:2018(Requirements for automatic electrical pressure sensing controls)(Technical documentation for the assessment of electrical and electronic products with respect to therestriction of hazardous substances)

Signed for and on behalfof:

10

INFICON AG, Alte Landstraße 6, LI-9496 Balzers

Balzers, 2024-01-02

Balzers, 2024-01-02

Rolf Enderes
Director Development & Software

Philip Kuntner
Product Manager

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Notestina29e1-a(2024-01)

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11Original: German

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LI–9496 Balzers
LiechtensteinTel +423 / 388 3111
Fax +423 / 388 3700
reachus@inficon.com
www.inficon.com