PSG500/-S, PSG502-S,
PSG510-S, PSG512-S

VCR®

Swagelok Marketing Co.

SafetySymbols Used
DANGER
Information on preventing any kind of physical injury.

Operating Manual
Incl. EU Declaration of Conformity

tina44e1-i(2015-10)

WARNING
Information on preventing extensive equipment and environmental damage.

Measurement range(air, O2, CO, N2)
Accuracy (N2)
1×10-3 … 100 mbar
5×10-4 … 1×10-3 mbar
100 … 1000 mbar
Resolution
Repeatability
1×10-3 … 100 mbar
Output signal (measurement signal)
Voltage range
Measurement range
Voltage vs. pressure

Product Identification
In all communications with INFICON, please specify the information on the product nameplate. For convenient reference copy that information into the space provided below.

INFICON AG, LI-9496 Balzers

Error signal
Filament rupture
Output impedance

Ω

2×4.7

Minimum loaded impedance
Response timekΩ

10, short-circuit proof

ms

80

All work described in this document may only be carried out
by persons who have suitable technical training and thenecessary experience or who have been instructed by theend-user of the product.

mbar

1E+4

DANGER

1E+3
1E+2
1E+1
1E+0

Torr

1E–1
1E–2

+5 … +60

°C

1E–3
1E–4
0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0 7.5 8.0 8.5 9.0 9.5 10.0
10.3

2)

Filament
Storage°C°C

110–20 … +65

valid in the range

Relative humidity%≤80 at temperatures up to≤+31 °C, decreasing to 50
at +40 °C
indoors only, altitude up to2000 m NN
any
IP40

U

p

c

U

p

c

[V]
[V]
[V]
[V]

[mbar][µbar][Torr][mTorr]

6.143
2.287
6.304
2.448

[V]
[V]
[V]

[micron]
[Pa]
[kPa]

2.448
3.572
7.429

Use

one tactile switch for ATM and
HV adjustment

Dimensions

Switching functions
Threshold value indication and setting

SP1, SP2
one tactile switch at measurement value output. Press briefly
for threshold indication. Keeppressing or press repeatedly for
threshold setting.
2×10-3 … 500 mbar
10% above lower threshold
30 V, 0.5 A (dc), floating
at low pressure (lamp is lit)
at high pressure, error, missing
supplyMeasurement signal U[V]in horizontal
mounting orientation

mm

where

((U-c)/1.286)

U = c + 1.286 × log10 p⇔

5×10-4 mbar <p< 1000 mbar
3.75×10-4 Torr <p< 750 Torr
5×10-2 Pa <p< 1×105 Pa

Gas Type Dependence

H2

8
6

He

• For gauges with a KF connection, use a conductive metallic clamping ring.

Ne
Air
O2
CO
N2

4
2

• If a ½" tube is used, take appropriate measures for this requirement to be fulfilled.
CO2

101

SupplyAr

86Freon 12
Kr

4

PSG512-S (Ni filament)
350-300 (DN 16 ISO-KF)

The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations inthis document correspond to the gauge with part number
350 060. They apply to gauges with other part numbers by
analogy.
We reserve the right to make technical changes without priornotice.
All dimensions in mm.

Communicate the safety instructions to all other users.

Liability and Warranty
INFICON assumes no liability and the warranty becomes nulland void if the end-user or third parties

19

14

15*)

29

2

Water vapor

Power consumption
Fuse required 1)
Electrical connection8
64

V (dc) +14 … +30
Vpp
≤1
mA
<500
(max. starting current)
W
≤1
AT
1
(slow)

Sensor cable
Cable length

FCC 68 / RJ45 applianceconnector, 8 poles, male
8 poles plus shielding≤100 m (8×0.14 mm2)

Grounding concept→ "Electrical Connection"

Vacuum connection tosignal common
Supply common tosignal common

connected via 1 MΩ(voltage difference <15 V)
conducted separately, fordifferential measurement

Materials exposed tovacuum
PSG500/-S, PSG502-S

The end-user assumes the responsibility in conjunction withthe process media used.
Gauge failures due to contamination or wear and tear, as well
as expendable parts (e.g. filament), are not covered by thewarranty.

PSG510-S,
PSG512-S

DIN 1.4301, DIN 1.4305,
DIN 1.4435, glass, Ni,
NiFe
Al2O3 (ceramics), Ni,
DIN 1.4435, DIN 1.4305
DIN 1.3981

Caution2

10–3
10–3 224

Supply voltage
At gauge
RippleCurrent consumption• use the product in a non-conforming manner• use the product with accessories not listed in the productdocumentation.

4

10–2

• disregard the information in this document• make any kind of interventions (modifications, alterationsetc.) on the product861/8" NPT

7/16-20 UNF
8 VCR
4 VCR

6

10–2 24

6

10–1 2

4

6

100

2

4

6

101

2

4

6

102

Calibration factors for the pressure range below 1 mbar

peff = C × pressure reading

DN 16 ISO-KF
DN 16 CF-R

Weight
DN 16 ISO-KF
DN 16 CF-R
1/8" NPT
8 VCR®
4 VCR®
½"-Rohr
7/16-20 UNF
DN 16 ISO-KF long tube
DN 16 CF-R
long tube

4

peff (mbar)

115• Before beginning to work, find out whether any vacuum
components are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

2

10–1

tube ½"

DN 16 CF-R
DN 16 ISO-KF)* PSG51x-S: 20 mm

41.5• Adhere to the applicable regulations and take the necessary precautions for all work you are going to do and consider the safety instructions in this document.

4

31.5

• Adhere to the applicable regulations and take the necessary precautions for the process media used.
Consider possible reactions between the materials and theprocess media.
Consider possible reactions (e.g. explosion) of the process
media due to the heat generated by the product.

The gauge may only be connected to power supplies, instruments or control devices that conformto the requirements of a grounded extra-low voltage (PELV). The connection to the gauge has tobe fused 1).

116

PSG502-S (Ni filament)
350-140(DN 16 ISO-KF)
350-142(DN 16 CF-R)
350-141(1/8" NPT)
350-144(8 VCR®)
350-145(4 VCR®)
350-143(½"-Rohr)
350-146(7/16-20 UNF)
350-147(DN 16 ISO-KF long tube)
350-148(DN 16 CF-R
long tube)

General Safety Instructions

Caution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to ensure cleanliness andprevent damages.

8
6

DANGER

This document applies to products with the following partnumbers:
PSG500 PSG500-S (W filament)
350-060
350-080(DN 16 ISO-KF)
350-062
350-082(DN 16 CF-R)
350-061
350-081(1/8" NPT)
350-064
350-084(8 VCR®)
350-065
350-085(4 VCR®)
350-063350-083(½"-Rohr)
350-066
350-086(7/16-20 UNF)
(DN 16 ISO-KF long tube)
350-067
350-087
350-068
350-088(DN 16 CF-R
long tube)

CautionXe

100

Validity

DANGER• CF, NPT, VCR® and UNF connections fulfill
this requirement.

Pressure reading (gauge adjusted for air)p (mbar)102

DANGER: overpressure in the vacuum system>2.5 bar
KF connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures. Process media can thus leak and possibly damage
your health.
Use O-rings provided with an outer centeringring.

DANGER: protective ground
Incorrectly grounded products can be extremely
hazardous in the event of a fault.
The gauge must be electrically connected to thegrounded vacuum chamber. This connection
must conform to the requirements of a protective
connection according to EN 61010:

p pressure
U measurement signal
c constant (depending on pressure unit)

20.9

32.8

DANGER: overpressure in the vacuum system>1 barInjury caused by released parts and harmcaused by escaping process gases can result if
clamps are opened while the vacuum system ispressurized.
Do not open any clamps while the vacuum system is pressurized. Use the type of clamps which
are suited to overpressure.

DANGER

p = 102

PSG510-S (W filament)
350-200(DN 16 ISO-KF)

Vacuum Connection

Pa

1E+5

80
80 2)
80
80
80
80
80

Adjustment

Setting range
Hysteresis
Relay contact
closedopen

Installation

Pressure p [mbar]
1E+6

°C
°C
°C
°C
°C
°C
°C

Mounting orientation
Protection category

Skilled personnel

W

Admissible temperatures
Operation
Vacuum connection
DN 16 ISO-KF
DN 16 CF-R
1/8" NPT
8 VCR®
4 VCR®
½"-Rohr
7/16-20 UNF

27.0 kΩ, referenced to supply
common (voltage at pin 4 ≤5 V)

Personnel Qualifications

Model:PN:
SN:
V

Information on correct handling or use. Disregard can leadto malfunctions or minor equipment damage.

2% of reading

V (dc) 0 … +10.3
V (dc) +1.9 … +10.0
logarithmic
1.286 V/decadeV
0 … +0.5
V+0.1

Gauge identification

Caution±15% of reading±50% of reading±50% of reading
1% of reading

70.3

Trademark50

Pirani Standard Gauge

thermal conductance according
to Pirani
5×10-4 … 1000 mbar

Measurement Signal vs. Pressure

Overrange

Measurement principle

≈1.5
≈1.5
≈2
≈2
≈2
≈2
≈1.5
≈10
≈10
10, limited to inert
gases

Underrange

They can be operated in connection with an INFICON controller or with another controller.

cm3
cm3
cm3
cm3
cm3
cm3
cm3
cm3
cm3
bar
(abs.)

Sensor error

Technical Data

Internal volume
DN 16 ISO-KF
DN 16 CF-R
1/8" NPT
8 VCR®
4 VCR®
½"-Rohr
7/16-20 UNF
DN 16 ISO-KF long tube
DN 16 CF-R
long tube
Admissible pressure

65

They must not be used for measuring flammable or combustible gases in mixtures containing oxidants (e.g. atmospheric
oxygen) within the explosion range.

g
g
g
g
g
g
g
g
g

80
100
70
130
100
70
80
130
140

Gas
type

Calibration
factor C

Gas type

Calibration
factor C

He
Ne
Ar
Kr
Xe

0.8
1.4
1.7
2.4
3.0

H2
air, O2, CO, N2
CO2
water vapor
freon 12

0.5
1.0
0.9
0.5
0.7

Caution: dirt sensitive area
Touching the product or parts thereof with barehands increases the desorption rate.
Always wear clean, lint-free gloves and use
clean tools when working in this area.

The gauge may be mounted in any orientation. To
keep condensates and particles from getting into themeasuring chamber preferably choose a horizontal
to upright position and possibly use a seal with acentering ring and filter. If adjustment should be possible after the gauge has been installed, be sure to
install it so that the button can be accessed with apin (→ "Adjusting the Gauge").
Remove the protective lid and install the product to the vacuum system.

Keep the protective lid.

Filament
PSG500/-S, PSG510-S
PSG502-S, PSG512-S

Intended Use

W
Ni

The Pirani Standard Gauges PSG500/-S, PSG502-S,
PSG510-S, PSG512-S have been designed for vacuum
measurement of gases in the pressure range of
5×10-4 … 1000 mbar.

t i na44e1- i

1)

INFICON controllers fulfill these requirements.

2)

250 °C with long tube.

Original: German tina44d1-i (2015-10)(2015-10)

Electrical Connection

 Release the button. The gauge resumes operation afterATM
HV

5 s and the connected controller displays the current
measurement value.

Make sure the vacuum connection is properly made(→ "Vacuum Connection").

 If no sensor cable is available, make one according to<SP1> <SP2>
SP2

SP2
SP1

Measurement
signal
1MΩ

4.7Ω
4.7Ω
27kΩ

+

6
8
7
3
5
4
1
2

 Evacuate to p << 10 mbar (recommended) or to a
+
–
Ident

+
–

1
Electrical connection
Pin 1
SupplyPin 2
Supply common, GND
Pin 3
Measurement signal
or thresholds SP1/2
Pin 4
Gauge identification
Pin 5
Signal common
Pin 6, 8
Relay SP2, closing contact
Pin 7, 8
Relay SP1, closing contact

WARNING: forwarding contaminated productsContaminated products (e.g. radioactive, toxic,
caustic or microbiological hazard) can be detrimental to health and environment.
Products returned to INFICON should preferably
be free of harmful substances. Adhere to theforwarding regulations of all involved countries
and forwarding companies and enclose a duly
completed declaration of contamination *).

Gauge failures due to contamination or wear andtear, as well as expendable parts (e.g. filament), arenot covered by the warranty.

-4pressure in the range of 10-4 … 10-2 mbar and wait atleast 2 minutes.

 Press the button with a pin and the HV adjustment iscarried out: The gauge is adjusted to 1.2×10-4 mbar
(1.1 V (dc)) by default. By pressing the button >5 s thepressure value is increased toward 1×10-2 mbar until
the button is released or the limit is reached.

8

Deinstallation*)

DANGERDANGER: contaminated parts
Contaminated parts can be detrimental to healthand environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.

(PSG500-S and PSG502-S only)
The setpoints are adjustable within a pressure range of
2×10-3 … 500 mbar (voltage range of 2.67 … 9.61 V (dc)).
Each switching function provides a floating relay contact(→ "Electrical Connection").
The status of the switching function is indicated by a lamp.

 Connect the sensor cable to the gauge and the controller.
Lamps

Status

Lamp

Relay

off
on

dark
lit

deenergizedenergized

When the supply voltage is applied, the measurement signal
is available between pins 3 and 5 (relationship between
measurement signal and pressure → "Technical Data").
Allow a stabilization period of at least 10 minutes. It is advisable to operate the gauge continuously, irrespective of thepressure.

nt
reme
asu
Me

value

Hysteresis (10%of threshold value)

Setpoint

CautionCaution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to ensure cleanliness andprevent damages.

CautionMeasurement signal (Pressure p)

Operation

Caution: dirt sensitive area
Touching the product or parts thereof with barehands increases the desorption rate.
Always wear clean, lint-free gloves and use
clean tools when working in this area.

Threshold value

Off

On

Off

Time t Vent the vacuum system.
 Put the gauge out of operation.

Gas Type Dependence
The measurement value is gas dependent. The pressure
reading applies to dry air, O2, CO and N2. For other gases, it
has to be corrected (→ "Technical Data").
If the gauge is operated with an INFICON controller, a calibration factor for correction of the actual reading can be applied (→  of the corresponding controller).

Adjusting the Gauge
The gauge is factory calibrated. Due to long time operation orcontamination, a zero drift could occur. Periodically check thezero and adjust it if necessary.
For adjusting the zero, operate the gauge under the sameambient conditions and in the same mounting orientation as
normally.
The gauge is adjusted to default values. However, it can also
be adjusted to other pressure values, if the exact pressure
value is known (reference measurement).

 If you are using a seal with centering ring and filter,check that they are clean or replace them if necessary(→ "Deinstallation").

Adjusting the Setpoints

DANGER: malfunction
If processes are controlled via the signal output,
keep in mind that by pressing a button <SP> themeasururement signal is suppressed and thatthe corresponding threshold value is output
instead. This can cause malfunctions.
Press a button <SP> only if you are sure that nodamages can arise from a malfunction.

 Remove the gauge from the vacuum system and install
the protective lid.

Form under www.inficon.com

Products that are not clearly declared as "free of harmful substances" are decontaminated at the expense of the customer.
Products not accompanied by a duly completed declaration ofcontamination are returned to the sender at his own expense.

• all information on the product nameplate

Ordering number

350-060, 350-080
350-062, 350-082
350-061, 350-081
350-064, 350-084
350-065, 350-085
350-063, 350-083
350-066, 350-086
350-067, 350-087
350-068, 350-088
350-200

350-920350-922350-921350-924350-926
350-923350-925350-927350-928
350 930

350-140
350-142350-141
350-144
350-145
350-143
350-146
350-147
350-148350-300

350-900
350-902350-901
350-904
350-906
350-903350-905
350-907350-908
350-940

Products

Pirani Standard Gauge
PSG500/-S, PSG502-S,
PSG510-S, PSG512-S

Standards

Harmonized and international/national standards and specifications:• description and ordering number according to the spareparts list

for gauge

We, INFICON, hereby declare that the equipment mentioned below complies with the provisions of the Directive relating to electromagnetic compatibility 2014/30/EU and the
Directive on the restriction of the use of certain
hazardous substances in electrical andelectronic equipment 2011/65/EU.

• EN 61000-6-2:2005 (EMC: generic emission standard)• EN 61000-6-3:2007 + A1:2011 (EMC: generic immunity
standard)• EN 61010-1:2010 (Safety requirements for electrical equip-

Disposalment for measurement, control and laboratory use)

• EN 61326-1:2013 (EMC requirements for electrical equip-

DANGERDANGER: contaminated parts
Contaminated parts can be detrimental to healthand environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.

WARNING

ment for measurement, control and laboratory use)

Manufacturer / Signatures

INFICON AG, Alte Landstraße 6, LI-9496 Balzers
19 October 201519 October 2015

Dr. Urs Wälchli
Managing Director

Marco Kern
Product Manager

WARNING: substances detrimental to the environment
Products or parts thereof (mechanical and electric components, operating fluids etc.) can be
detrimental to the environment.
Dispose of such substances in accordance withthe relevant local regulations.
Separating the components

After disassembling the product, separate its components
according to the following criteria:• Contaminated components
Contaminated components (radioactive, toxic, caustic, or
biological hazard etc.) must be decontaminated in accordance with the relevant national regulations, separated
according to their materials, and disposed of.
• Other components
Such components must be separated according to theirmaterials and recycled.

The status of the relay and lamp is not affected bypressing the button.

 Press the button <SP1> with a pin (max. ø1.1 mm):
The gauge changes to the switching function mode andoutputs the current lower threshold value at themeasurement value output for about 5 s. When the
button is kept depressed for more than 5 s, thethreshold setting is modified until the button is released
or until the limit of the setting range is reached.

max. ø1.1 mm

sure for at least 10 minutes.

ATM adjustment is carried out: The gauge is adjusted
to 1000 mbar (10 V (dc)) by default. By pressing the
button >5 s the pressure value is increased towards
1200 mbar (or, by pressing it again, decreased towards
500 mbar) until the button is released or the limit isreached.

 Unplug the sensor cable.

DANGER Activate the gauge and operate it at atmospheric pres Press the button with a pin (max. ø1.1 mm) and theWhen ordering spare parts, always indicate:

Sensor

Switching Functions
8-poleFCC-68connector

Spare Parts

EU Declaration of Conformity

WARNINGINFICON assumes no liability and the warranty becomes nulland void if any repair work is carried out by the end-user or
third parties.

Gauge with switching functions

SP1

Returning the ProductIn case of severe contamination or a malfunction, the sensor
can be replaced.

The adjustment procedure for <SP2> is the same as described for <SP1>.

max. ø1.1 mm

the following diagram.

Maintenance, Repair

Keep the button
depressed

The upper threshold is 10% above
the lower one(hysteresis).

 When the button is pressed again within 5 s the threshold setting is adjusted in the reverse direction.

LI–9496 Balzers
LiechtensteinTel +423 / 388 3111
Fax +423 / 388 3700
reachus@inficon.com
www.inficon.com