• Adhere to the applicable regulations and take the necessary precautions for the process media used.
Consider possible reactions between the materials andthe process media.
Consider possible reactions (e.g. explosion) of theprocess media due to the heat generated by the product.

ValidityThis document applies to products with the following partnumbers:
MPG400 (FPM sealed)
MPG401 (all-metal)
351-020 (DN 25 ISO-KF)
351-010 (DN 25 ISO-KF)
351-011 (DN 40 ISO-KF)
351-021 (DN 40 ISO-KF)
351-012 (DN 40 CF-F)
351-022 (DN 40 CF-F)
The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations inthis document correspond to the product with part number351-010. They apply to the other products by analogy.
We reserve the right to make technical changes without priornotice.
All dimensions in mm.

Intended Use
The Inverted Magnetron Pirani Gauges MPG400 and
MPG401 have been designed for vacuum measurement in
the pressure range of 5×10-9 … 1000 mbar.
The Inverted Magnetron Pirani Gauges must not be used formeasuring flammable or combustible gases which react inair.
The gauges can be operated in connection with an INFICON
Vacuum Gauge Controller of the VGC40x / VGC50x series,
or with another controller.

Functional Principle
The gauges consist of two separate measurement systems(Pirani and cold cathode system) the signals of which are
combined in such a way that one measurement signal isoutput. The Pirani measurement circuit is always on.

• Before beginning to work, find out whether any vacuum
components are contaminated. Adhere to the relevant regulations and take the necessary precautions when handling contaminated parts.

DANGERDANGER: magnetic fields
Strong magnetic fields can disturb electronic
devices like heart pacemakers or impair theirfunction.
Maintain a safety distance of =10 cm between
the magnet and the heart pacemaker or preventthe influence of strong magnetic fields by antimagnetic shielding.
Communicate the safety instructions to all other users.

10–1
86
4Water2vapor
10–2–3
10 2 4 6 10–2 2

4 6 10–1 2

4 6 100 2

4 6 101 2

75

60

Caution–2

ø 63.5

Caution: dirt sensitive area
Touching the product or parts thereof with one'sbare hands increases the desorption rate.
Always wear clean, lint-free gloves and use
clean tools when working in this area.

Indication range
10-6 ... 10-1 mbar

2Ar

86
4

WARNING2Air
N2O2COø 63.5

864

WARNING: electric arcing
Helium may cause electric arcing with detrimental effects on the electronics of the product.
Before performing any tightness tests put theproduct out of operation and remove the electronics unit.

2He

10–5
864

High voltage on (LED on)

2

10–6
10-6 24 6 10-6 2

4 6 10–4 2

4 6 10-3 24 6 10-2 2

Voltage at the gauge

15 … 30 V (dc)(ripple ≤1 Vpp)

Power consumption
Fuse1)≤2 W

Voltage at the supply unit withmaximum cable length

16 … 30 V (dc)2)(ripple ≤1 Vpp)

Adjustment
Potentiometer <HV>
Potentiometer <ATM>≤1 AT

adjustment under 10-4 mbar
adjustment at atmosphericpressure

Electrical connection
Sensor cableLine length

FCC68 socket, 8 poles
8 poles, shielded≤50 m (8×0.14 mm²)

Operating voltage
Operating current≤3.3 kV

INFICON assumes no liability and the warranty becomes nulland void if the end-user or third parties

Supply common – signal
commonMaterials exposed to vacuum
Vacuum connection
Measurement chamber
Feedthrough isolation
Internal seal
MPG400
MPG401
AnodeIgnition aid
Pirani measurement tube
Pirani filament
Mounting orientation

DN 25 ISO-KF

10-1

conducted separately

Weight351-010351-011351-012Air(O2, CO, N2)

Xe

KrAr

H2NeHeK (meanvalues)

1.0

0.4

0.5

0.8

2.4

4.1

5.9

≈700 g≈720 g≈980 g351-020351-021351-022

The gauge may be mounted in any orientation. To
keep condensates and particles from getting into themeasuring chamber preferably choose a horizontal
to upright position and possibly use a seal with acentering ring and filter.
When making a CF flange connection, it can beadvantageous to temporarily remove the electronics
and the magnet unit (→  Operating Manual
tina48e1).
Remove the protective lid and install the product at thevacuum system.

≈730 g≈750 g≈1010 gMeasuring Signal vs. Pressure

Installation

Pressure pPa

1E+04
p = 101.667U-d

1E+00
1E–02
1E–04

torr

1E–06
1E–08
0.00.5 1.5 2.5 3.5 4.5 5.5 6.5 7.5 8.5 9.5 10.5
U [V]

Measurement signal U [V]p = 101.667×U-ddcvalid in the range2)

Vacuum Connection

Hex. socket
AF 1.5mbar

1E+02

FPM 75
Ag, Cu, soft solder (Sn, Ag)Mo
stainless steel
Ni, AuW

INFICON controllers fulfill these requirements.
The minimum voltage of the power supply unit must be increased proportionally to the length of the sensor cable.

Gas type
DN 40 CF-F

stainless steel
stainless steel
ceramic

any

DN 40 ISO-KF

In the range below 10-5 mbar, the pressure indication islinear.
For gases other than air, the pressure can be determined bymeans of a simple conversion formula:peff = K × pressure reading≤500 µA→ "Electrical Connection"• disregard the information in this document

4 6peff (mbar)

The gauge may only be connected to power
supplies, instruments or control devices that conform to the requirements of a grounded extralow voltage (PELV). The connection to thegauge has to be fused 1).

2)

102

864DANGER

1)

4 6Caution: vacuum component
Dirt and damages impair the function of thevacuum component.
When handling vacuum components, take appropriate measures to ensure cleanliness andprevent damages.

10–1

10–4

High = 15 … 30 V (dc)connected via 10 kΩ (max.
voltage differential withrespect to safety ±50 V
accuracy ±10 V)

The end-user assumes the responsibility in conjunction withthe process media used.
Gauge failures due to contamination, as well as expendable
parts (filament), are not covered by the warranty.

55

Low = 0 V

Vacuum connection –measuring common• use the product with accessories not listed in the productdocumentation.

Caution

210–3

Grounding concept• make any kind of interventions (modifications, alterationsetc.) on the product• For gauges with a KF flange, use a conductive metallic clamping ring

864864

Low = 0 V

Liability and Warranty• use the product in a non-conforming manner• CF connections fulfill this requirement.

Xe

100

10pin 6Supply• Adhere to the applicable regulations and take the necessary precautions for all work you are going to do and consider the safety instructions in this document.

CO2ArFreon 12Kr22overrange

General Safety Instructions

Statusp > 10-2 mbar
Pirani-only modep < 10-2 mbar
Cold cathode notignited
Pirani-only modep < 10-2 mbar
Cold cathode ignited
Combined Pirani /cold cathode mode
LEDIndication range>10-2 mbar)

864

The gauge must be electrically connected to thegrounded vacuum chamber. This connection
must conform to the requirements of a protective
connection according to EN 61010:

p (mbar)sensor error

In all communications with INFICON, please specify the information on the product nameplate. For convenient reference copy that information into the space provided below.

85 kΩ, referenced to supply
common2101

AirO2CON2peff (mbar)

15.5

All work described in this document may only be carriedout by persons who have suitable technical training and thenecessary experience or who have been instructed by theend-user of the product.

Identification gauge

Type of protection

32

Product Identification

Skilled personnel

2×10 Ω
10 kΩ, short-circuit proof(pressure dependent)<10 ms≈1000 ms

Use

18.5

(2017-07)

Output impedance
Minimum loaded impedance
Response timep > 10-6 mbar
p = 10-8 mbar

Dimensions [mm]≤80% at temperatures≤+31°C decreasing to 50%
at +40°C
indoors only
altitude up to 2000 m
IP 40105

tima48e1-b

Relative humidity

60

Incl. EU Declaration of Conformity

0 … +10.5 V
1.82 … 8.6 V
logarithmic , 0.6 V/decade<0.5 V no supply>9.5 V Pirani sensor defective (filament rupture)

H2 He Ne

86424

Personnel Qualifications

Pirani filament
Storageunderrange

Information on correct handling or use. Disregard can leadto malfunctions or minor equipment damage.

+5…+55 °C
150 °C (without electronics
and magnetic shielding)
120 °C-40…+65 °C

55Caution

DANGERp (mbar)102

Temperatures
Operation 2)
Bakeout

sensor error

Information on preventing extensive equipment and environmental damage.

Output signal (measuringsignal)
Voltage range
Measurement range
Voltage vs. pressure
Error signal

1×10-8 … 100 mbar)≈±5% (in the range
1×10-8 … 100 mbar)

Gas Type Dependence≤10 bar (absolute),
limited to inert gases

75

Information on preventing any kind of physical injury.

WARNING

Instruction Sheet

Repeatability

5×10-9 … 1000 mbar≈±30% (in the range≈20 cm³92MPG400
MPG401DANGER

Measurement range (air, N2)
Accuracy (N2)28

Symbols Used

Inverted Magnetron Pirani
Gauge

Internal volumePressure

Technical Data

18

SafetyU = c + 0.6log10 p⇔mbar

PaTorr

11.33
6.8

9.33
5.6

11.46
6.875

5×10-9 mbar <p< 1000 mbar
3.8×10-9 Torr <p< 750 Torr
5×10-7 Pa <p< 1×105 Pa

MPG401: Up to 150 °C at the flange if mounted horizontally;
without magnetic shielding

DANGERDANGER: overpressure in the vacuum system>1 barInjury caused by released parts and harmcaused by escaping process gases can result if
clamps are opened while the vacuum system ispressurized.
Do not open any clamps while the vacuum system is pressurized. Use the type of clamps which
are suited to overpressure.

AF 7

Protective lid

Keep the protective lid.

DANGERDANGER: overpressure in the vacuum system>2.5 bar
KF flange connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures. Process media can thus leak and possibly damage
your health.
Use O-rings provided with an outer centeringring.

t i ma 4 8 e 1 - b

Original: German tima48d1-b (2017-07)(2017-07)

Ignition Delay
Seal withcentering ring

Maintenance, Troubleshooting

When cold cathode measurement systems are activatedupon switching the gauge on, an ignition delay occurs, which
is typically:-5

10 mbar10-7 mbar
5×10-9 mbarorProtective lid

Clamp

Seal with centering ringand filter

Keep the protective lid.
If adjustment should be possible after the gauge has been
installed, be sure to install it so that potentiometers <HV>and <ATM> can be accessed with a screwdriver(→ "Adjusting the Gauge").

As long as the cold cathode measurement circuit has not yet
ignited, the measurement value of the Pirani is output asmeasuring signal ("Pirani underrange" is displayed for pressures <5×10-4 mbar).

or… to 1×103 mbar

Returning the ProductWARNING

 Turn the nameplate back to its original position (itcatches).

check that they are clean or replace them if necessary(→ "Deinstallation").

Deinstallation

 Evacuate it to p << 10 mbar and wait at least

DANGER-4

10 minutes.

 Turn the nameplate counter-clockwise until the mechanical stop is reached.

DANGER: contaminated partsContaminated parts can be detrimental to healthand environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.

Caution: vacuum component
Dirt and damages impair the function of thevacuum component.
When handling vacuum components, take appropriate measures to ensure cleanliness andprevent damages.

cable.

While depressing the tactile switch with a cylindricalpin (ø ≈ 3 mm), adjust the <HV> potentiometer bymeans of a 1.5 mm screwdriver …
… to 4.20 Vor… to 5×10-4 mbar

Allow for a stabilizing time of ≈10 minutes. Once the gauge
has been switched on, permanently leave it on irrespective ofthe pressure.
• The Pirani measurement circuit is always on.
• The cold cathode measurement circuit is controlled by thePirani circuit and is activated only at pressures<1×10-2 mbar.

Gas Type Dependence• 2014/30/EU, OJ L 96/79, 29.3.2014(EMC Directive; Directive relating to electromagnetic compatibility)• are certified to the CAN/CSA Standard
C22.2 No. 61010-1• 2011/65/EU, OJ L 174/88, 1.7.2011(RoHS Directive; Directive on the restriction of
the use of certain hazardous substances inelectrical and electronic equipment)

WARNING: forwarding contaminated productsContaminated products (e.g. radioactive, toxic,caustic or microbiological hazard) can be detrimental to health and environment.
Products returned to INFICON should preferably
be free of harmful substances. Adhere to the forwarding regulations of all involved countries andforwarding companies and enclose a duly completed declaration of contamination(Form under www.inficon.com).
Products that are not clearly declared as "free of harmfulsubstances" are decontaminated at the expense of thecustomer.
Products not accompanied by a duly completed declarationof contamination are returned to the sender at his own expense.

Inverted Magnetron Pirani
Gauge
MPG400
MPG401
Part numbers
351-020351-010351-021351-011351-022351-012

Standards
Harmonized and international/national standards and specifications:• EN 61000-6-2:2005 (EMC: generic immunity standard)• EN 61000-6-3:2007 + A1:2011 (EMC: generic emissionstandard)• EN 61010-1:2010 (Safety requirements for electrical equipment for measurement, control and laboratory use)

• EN 61326-1:2013; Group 1, Class B (EMC requirements

for electrical equipment for measurement, control and laboratory use)

Manufacturer / Signatures

Disposal

After that, turn thepotentiometer counterclockwise by 1/3 of a turn.

 Vent the gauge with air or nitrogen to atmosphericpressure, and wait at least 10 minutes.

 Turn the nameplate clockwise until the mechanical stop

DANGERDANGER: contaminated parts
Contaminated parts can be detrimental to healthand environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.

17 July 201717 July 2017

Dr. Bernhard Andreaus
Director Product Evolution

Markus Truniger
Product ManagerCaution
Caution: dirt sensitive area
Touching the product or parts thereof with one's
bare hands increases the desorption rate.
Always wear clean, lint-free gloves and use
clean tools when working in this area.

Operation
When the supply voltage is applied, the measuring signal isavailable between pins 3 and 5. Over the whole measurement range, the measuring signal is output as a logarithm of
the pressure (measuring signal vs. pressure → "TechnicalData").

• conform to the UL Standard UL 61010-1

INFICON AG, Alte Landstraße 6, LI-9496 Balzers

Caution Connect the gauge to the controller using the sensor

The products MPG400 and MPG401

We, INFICON, hereby declare that the equipment mentioned below comply with the provisions of the following Directives:

ETL LISTED

Using the 1.5 mm screwdriver, adjust the <ATM>
potentiometer …

 If you are using a seal with centering ring and filter, Activate the gauge.

EU Declaration of Conformity

3103457

The gauge is factory-calibrated. If used under different climatic conditions, through extreme temperatures, aging or contamination, and after exchanging the sensor, the characteristic
curve can be offset and readjustment may become
necessary.
The cold cathode measurement circuit, which is dominant for
low pressures (<1×10-3 mbar), is factory-calibrated. By way ofcontrast, the Pirani measurement circuit can be adjusted.
Any adjustment has a negligible effect on the pressure range
between approx. 10-2 mbar and 102 mbar.

RECOGNIZEDCOMPONENT

Gauge failures due to contamination, as well as
expendable parts (filament), are not covered by thewarranty.

… to 8.60 V

Adjusting the Gauge If no sensor cable is available, make one according to
the following diagram.

If operated at high pressures or under dirty conditions, the gauge must be regularly cleaned.

≈ 1 second≈ 20 seconds≈ 2 minutes

Electrical Connection
Make sure the vacuum connection is properly
made (→ "Vacuum Connection").

→  Operating Manual tina48e1

ETL Certification

 Vent the vacuum system.
 Put the gauge out of operation and unplug the sensor
cable.

 Remove the gauge from the vacuum system and place
the protective lid.

is reached.
When deinstalling a CF flange connection, it can beadvantageous to temporarily remove the electronics
and the magnet unit (→"Installation").

WARNINGWARNING: substances detrimental to theenvironment
Products or parts thereof (mechanical and electric components, operating fluids etc.) can bedetrimental to the environment.
Dispose of such substances in accordance withthe relevant local regulations.

Separating the components
After disassembling the product, separate its components
according to the following criteria:• Contaminated components
Contaminated components (radioactive, toxic, caustic, orbiological hazard etc.) must be decontaminated in accordance with the relevant national regulations, separated
according to their materials, and disposed of.
• Other components
Such components must be separated according to theirmaterials and recycled.

The measurement value depends on the type of gas being
measured. The value displayed is accurate for dry air, O2,
CO and N2. It can be mathematically converted for othergases (→ "Technical Data").
If the gauge is operated in connection with an INFICON
vacuum gauge controller, a calibration factor can be enteredfor correction of the reading.

LI–9496 Balzers
LiechtensteinTel +423 / 388 3111
Fax +423 / 388 3700
reachus@inficon.com
www.inficon.com