MNC 2019, October 28-31, 2019, Hiroshima, Japan

Monday, October 28
Room A (Cosmos 1, B2F)

13:00-17:00 MNC 2019 Technical Seminar in Japanese
Room B (Cosmos 2, B2F)

17:20-19:20 Get Together Party

Tuesday, October 29
Room P1 (Himawari, B2F)
Chairs: K. Nishiguchi (NTT) and K. Asakawa (KIOXIA)

29P-1-0 Opening Session (9:30-9:50)
Opening Remarks: Y. Ono (Shizuoka Univ.), Award Presentation: K. Nishiguchi (NTT) and Y. Ono (Shizuoka Univ.)
Local Announcement from Committee: T. Tsuchiya (Kyoto Univ.)

29P-1: Plenary Session (9:50-12:10)
29P-1-1 (9:50-10:30)
Future Fab and the Skills of Tomorrow (Plenary)
R. Hasan, Micron Memory, Japan
Coffee Break
Chairs: D. Kondo (Fujitsu Labs.) and K. Furukawa (Meisei Univ.)

29P-1-2 (10:50-11:30)
Computing Reimagined - AI/quantum/IoT (Plenary)
S. Yamamichi, IBM, Japan

29P-1-3 (11:30-12:10)
Building the Next Ubiquitous Computing Device with Room Temperature Quantum Materials (Plenary)
S. Manipatruni, Kepler Computing, USA
Room P1 (Himawari, B2F)
Lunchone Seminer (Free) by Technical Exhibitors (12:20-13:20)
12:20-12:30 ELIONIX INC.
12:30-12:40 Heidelberg Instruments

12:40-12:50 THERMO RIKO CO.,LTD.

Room A (Cosmos 1, B2F)
Room B (Cosmos 2, B2F)
Room C (Ran 1, B2F)
29A-2: Symp. A: Nano-Materials, 29B-2: Inorganic Nanomaterials - 29C-2: Symp. D: Innovative
Processes, and Devices for
Nanointerface
Technologies for Direct
Next-Generation Edge AI I
Observation of Cellular Vital
Phenomena I

Room D (Ran 2, B2F)
29D-2: Organic Nanomaterials I

Room P1 (Himawari, B2F)
29P-2: Symp. B: Atomic Layer
Processing (ALP) Symposium I

Chairs:S. Kasai (Hokkaido Univ.)
H. Tanaka (Kyushu Inst. ofTechnol.)

Chairs:R. Hayakawa (NIMS)
S. Nagano (Nagoya Univ.)

Chairs:H. Arimoto (AIST)
J. Kim (Univ. of Texas)

Chairs:K. Hatakeyama (AIST)
M. Minohara (AIST)

Chairs:A. Miura (Hokkaido Univ.)
S. Kumagai (Meijo Univ.)

29A-2-1

29B-2-1

29C-2-1

29D-2-1

29P-2-1

13:30
Make AI: Hardware-Driven Open
Innovation Platform for Edge-AI(Invited)
T. Asai and H. Momose, Hokkaido
Univ., Japan

13:40
Hot Carrier Optoelectronics Basedon van der Waals Semiconductors(Invited)
G. Eda, Natl. Univ. of Singapore,
Singapore

13:40
Microsystems for Single Molecule
Analysis of Membrane Proteins(Invited)
R. Watanabe, RIKEN, Japan

13:30
P3HT/ LIPID Monolayer Interface
for Low Power OFET Sensors(Invited)
V. Kilinc, C.H. de Villeneuve, T.P.
Nguy, M. Petit, G. Monnier, Y.
Wakayama, J.-M. Raimundo, A.M.
Charrier 1, 1 Aix Marseille Univ, 2PMC, France, 3 NIMS, Japan, 4Institut Pascal, France

13:50
ZnO Composite Nanolayer with
Mobility Edge Quantization for MultiValue Logic Transistors (Invited)
L. Lee 1, J. Hwang 2, J. Kim 1, H.-I.
Lee 3, S. Heo 3, M. Yoon 4, S. Choi5, N. van Long 1, J.W. Jeong 6, J.
Kim 2, K.R. Kim 6, D.H. Kim 5, S. Im
4, B.H. Lee 3, K. Cho 2 and M.M.
Sung 1, 1 Hanyang Univ., Korea, 2
Univ. of Texas at Dallas, USA, 3
Gwangju Inst. of Sci. and Technol.,
4 Yonsei Univ., 5 Kookmin Univ., 6
Ulsan Natl. Inst. of Sci. andTechnol., Korea

29A-2-2

29B-2-2

29C-2-2

29D-2-2

29P-2-2

14:00
Charge Carrier Generation and
Dynamics: towards Applications in
Various Chemical Sensing and inMaterio Computation Scenarios(Invited)

14:10
Two-Dimensional van-derWaals/Electrostatic
Heterostructures: IntriguingElectrical and Optical Featuresfrom Their Chemical Coupling

14:15
Droplet Microfluidics for Liquid
Biopsy in Clinical Diagnostics(Invited)

14:00
Laser-Based Fabrication ofOrganic Crystals (Invited)

14:20
Achieving High Throughput ALD
Combining Chemistry andEquipment Approaches (Invited)

M. Lis, D. Przyczyna, P. Zawal, E.
Wlaźlak, K. Pilarczyk, T. Mazur
and K. Szaciłowski, AGH Univ. ofSci. and Technol., Poland

L. Nurdiwijayanto 1, T. Taniguchi 1, A. Tagawa, Sysmex, Japan
S. Li 1, Y. Miyata 2, K. Tsukagoshi
1, Y. Ebina 1, M. Osada 1,3 and T.
Sasaki 1, 1 NIMS, 2 Tokyo
Metropolitan Univ. and 3 Nagoya
Univ., Japan

C.-S. Wu 1,2, H.Y. Yoshikawa 2
C. Dussarrat, Air Liquide, Japanand T. Sugiyama 1,3, 1 Natl.
Chiao-Tung Univ., Taiwan, 2
Saitama Univ. and 3 NAIST, Japan

29A-2-3

29B-2-3

29C-2-3

29D-2-3

14:30
Quantum Computation Using
Nonlinear Parametric Oscillators(Invited)

14:30
Support Effect in Metal-Oxide
Semiconductor Junction

14:50
Cellular Responses toFemtosecond Laser Induced
ImpulseH. Goto, Toshiba, JapanJ. Kano 1, N. Oshime 1, S. Hirose R. Yasukuni, S. Yamada, K.
Okano, Y. Hosokawa, NAIST,2, T. Ueda 1, S. Yasui 3, Y.
Hamasaki 3, M. Itoh 3, H. Mikami Japan2, N. Ikeda 1, T. Fujii 1, K.
Kashihara 1 and J. Schneider 4, 1
Okayama Univ., 2 Honda R&D, 3
Tokyo Inst. of Technol., Japan and
4 Inst. Natl. Polytechnique deToulouse, France

14:30
14:50
Atomic Layer Deposition of GaN
One-Dimensional Growth of 2,7Thin Films Using
Dioctyl[1]Benzothieno[3,2Pentamethylcyclopentadienylgalliumb]Benzothiophene (C8-BTBT)
Nanowires Realized by on-Terrace
Graphoepitaxy
N. Hiroshiba 1,2, R. Hayakawa 1
F. Mizutani, S. Higashi and N.
and Y. Wakayama 1, 1 NIMS and 2 Takahashi, Kojundo Chemical Lab.,
Tohoku Univ., JapanJapan

1 / 1529P-2-3

MNC 2019, October 28-31, 2019, Hiroshima, Japan

Author's Interview: None

29B-2-4

29D-2-4

29P-2-4

14:50
Crystal Growth, Exponential
Optical Absorption Edge, andGround State Energy Level of PbS
Quantum Dots on the Different
Surfaces of Single Crystal RutileTiO2
T. Toyoda 1, Q. Shen 1, K.
Kamiyama 2 and S. Hayase 3, 1
Univ. of Electro-Communications, 2Bunkoukeiki and 3 Kyushu Inst. ofTechnol., Japan

14:50
A Comparative Study Related to
Nature of Interface between Metal
and Conjugated Polymer: Role of
Molecular Ordering

15:10
Fe3O4/ZnO Core Shell Nanoparticles
Fabricated by Atomic Layer
Deposition and Its Application for
Drug Delivery Agent

Author's Interview: 16:55-17:05

S. Seong, T. Lee, S.Y. Kim, I.-S.
N. Yadav 1, N. Kumari 2, S.S
Pandey 2 and V. Singh 1, 1 Indian Park and J. Ahn, Hanyang Univ.,
Inst. of Technol. Indore, India and Korea
2 Kyushu Inst. of Technol., Japan
Author's Interview: 16:55-17:05

Author's Interview: 17:05-17:15

Author's Interview: 17:25-17:35

Room P2 (Dahlia, B2F)
Coffee BreakRoom A (Cosmos 1, B2F)
Room B (Cosmos 2, B2F)
Room C (Ran 1, B2F)
29A-3: Symp. A: Nano-Materials, 29B-3: Inorganc Nanomaterials - 29C-3: Symp. D: Innovative
Processes, and Devices forInterface Engineering
Technologies for Direct
Next-Generation Edge AI II
Observation of Cellular Vital
Phenomena II
Chairs:Chairs:Chairs:S. Kasai (Hokkaido Univ.)
T. Tsuchiya (NIMS)
A. Miura (Hokkaido Univ.)
H. Tanaka (Kyushu Inst. of
J. Kano (Okayama Univ.)
S. Kumagai (Meijo Univ.)
Technol.)

29A-3-1

29B-3-1

15:15
15:45
Analog Memory-Based Techniques DFT Study on Carrier Transport
for Accelerating Deep Neural
Property at Interface (Invited)
Networks (Invited)
H. Tsai, S. Ambrogio, C. Mackin,
T. Ono, Kobe Univ., Japan
P. Narayanan, A. Chen and G.W.
Burri, IBM Almaden Res. AI, USA

Room D (Ran 2, B2F)
Room P1 (Himawari, B2F)
29D-3: Organic Nanomaterials II 29P-3: Symp. B: Atomic Layer
Processing (ALP) Symposium II

Chairs:R. Hayakawa (NIMS)
S. Nagano (Nagoya Univ.)

Chairs:J. Ahn (Hanyang Univ.)
M.M. Sung (Hanyang Univ.)

29C-3-1

29D-3-1

29P-3-1

15:25
Application of Cup-Shaped Metal
Hemispheres for Single Cell
Measurements (Invited)
H. Kim 1,2, 1 AIST and 2 Tokyo
Univ. of Agriculture and Technol.,
Japan

15:25
15:45
Electrochemical Synthesis andElectron-Enhanced Atomic Layer
Electrocatalytic Application of
Deposition (EE-ALD) (Invited)
Pt/PEDOT Composite Film
Y.-F. Du 1, C.-J. Yang 2, L.-L. Li 1, A. Cavanagh, J.K. Sprenger, Z.C.
1 Natl. United Univ. and 2 Natl.
Sobell and S.M. George, Univ. of
Chung Hsing Univ., Taiwan
Colorado, USA

29A-3-2

29B-3-2 Withdrawn

29C-3-2

29D-3-2

29P-3-2

15:45
Control of Analog Change inResistance and Its Characteristics
Using Atomic Switches (Invited)

15:55
High-Quality Single-Mode Laserfrom Zero-Dimensional Inorganic
Perovskite Hexagonal Microdisks

16:00
Polymeric Engineering of
Nanoparticles for EfficientMultifunctional Drug Delivery
Systems (Invited)

15:45
Bottom-up Preparationof Relaxor
Ferroelectric Polymer Nanofilms

16:15
New Physico-Chemical Approaches
in Area-Selective Atomic Layer
Deposition and Etching (Invited)

T. Hasegawa 1, A. Suzuki 1 and T. Z. Liu 1, J. Yang 2, J. Du 1, X.
Tsuruoka 2, 1 Waseda Univ. and 2 Tang 2 and Y. Leng 1, 1 Chinese
NIMS, Japan
Academy of Sci. and 2 Chongqing
Univ., China

B. Fortuni 1, T. Inose 2, M. Ricci 1, C. Fu, H. Zhu, T. Miyashita and M.
I.V. Zundert 1, A. Masuhara 3, S. Mitsuishi, Tohoku Univ., Japan
Rocha 1 and H. Uji-i 1,2, 1 KU
Leuven, Belgium, 2 Hokkaido Univ.
and 3 Yamagata Univ., Japan

A. Mameli 1, P.Poodt 1 and F.
Roozeboom 1,2, 1 TNO-Holst
Centre and 2 Eindhoven Univ. ofTechnol., The Netherlands

29A-3-3

29B-3-3

29C-3-3

29D-3-3

29P-3-3

16:15
Neuromorphic Pulse Generation
Devices Using Nanomaterials(Invited)

16:15
Investigation of Measurement
Environmental Sensitivity inAmorphous Indium Oxidebased
Thin-Film Transistors

16:35
Morphological Dynamics andMechanics of Drug-Stimulated
Living Cell Visualized by High
Speed Scanning Ion ConductanceMicroscope (HS-SICM)

16:05
Highly luminescent Perovskite
Nanocrystals by UltrasoundAssisted Bead Milling andApplication for Quantum DotsLight-Emitting Diodes

16:45
XPS Study ofHexafluoroacetylacetone (hfacH)
Adsorbed on Cobalt surfaces for
Atomic Layer Etching (ALE)

H. Tanaka, Kyushu Inst. ofTechnol., JapanK. Nakamura, K. Sasaki, Y.
Shibata, K. Oe and S. Aikawa,
Kogakuin Univ., JapanK. Umemoto 1, Y. Tezuka 1, D.
L. Sun, S. Kitazawa and S.
T. Ito, K. Karahashi and S.
Watanabe, Kanazawa Univ., Japan Sasaki 1, M. Takeda 1, H. Ebe 1, Hamaguchi, Osaka Univ., Japan
Y. Takahashi 1, B. Lyu 1, S.
Rodbuntum 1, J. Enomoto 1, T.
Nohara 1, T. Chiba 1, S. Asakura
1,2,3 and A. Masuhara 1, 1
Yamagata Univ., 2 Chiba Univ. and3 Ise Chem., Japan

29B-3-4

29D-3-4

16:35
Photoelectron Spectroscopic Studyon Electronic State of Corundum
In2O3 Epitaxial Thin Film Grown by
Mist-CVD
T. Nagata 1, T. Yamaguchi 2, S.
Ueda 1, W. Yi 1, J. Chen 1, T.
Kobayashi 2, H. Yokoo 2, Y.
Yamahita 1 and T. Chikyow 1, 1
NIMS and 2 Kogakuin Univ., Japan

16:25
Solution- Processed OrganicInorganic Perovskite Nonvolatile
Memory Devices
B.-Y. Gong 1,2, K.-Y. Chen 1,2, C.C. Yang 2 and Y.-K. Su 1,2, 1 Natl.
Cheng Kung Univ. and 2 Kun Shan
Univ., Taiwan
29D-3-5
16:45
High Efficiency Tandem BluePHOLEDs Using Ytterbium-Based
Charge Generation Layer
D.-p. Park, W.-h. Park and S.S.
Kim, Sungkyunkwan Univ., Korea

Author's Interview: None

Author's Interview: 16:55-17:05

Author's Interview: 16:55-17:05

2 / 15

Author's Interview: 17:05-17:15

Author's Interview: 17:00-17:10

MNC 2019, October 28-31, 2019, Hiroshima, Japan

Wednesday, October 30
Room A (Cosmos 1, B2F)
Room B (Cosmos 2, B2F)
30A-4: Nanoimprint, Hybrid-NIL, 30B-4: Symp. C. 2D Materials I
Biomimetics, and Functional
Surfaces I

Room C (Ran 1, B2F)
30C-4: NanoTool I

Room D (Ran 2, B2F)
30D-4: Microsystem Technology
and MEMS I

Chairs:A. Miyauchi (Tokyo Medical and
Dental Univ.)
J. Taniguchi (Tokyo Univ. of Sci.)

Chairs:K. Sugano (Kobe Univ.)

Chairs:S. Nagasawa (Shibaura Inst. ofTechnol.)
H. Hiraga (Toshiba)

30D-4-1

Chairs:D. Kondo (Fujitsu Labs.)
K. Yanagi (Tokyo Metropolitan
Univ.)

30A-4-1

30B-4-1

30C-4-1

9:00
Going 3D: Nanoimprinting andComplex Geometries (Invited)

9:00
Synthesis and Applications of 2D
Layered Semiconductors andHeterostructures beyond MoS2
(Invited)
W.-H. Chang, Natl. Chiao Tung
Univ., Taiwan

9:00
9:00
Structural and Functional
TBC (Invited)
Visualization of Biomolecules byFrequency-Modulation Atomic
Force Microscopy (Invited)
H. Kominami 1, K. Kobayashi 1, Y. E. Iwase, Waseda, Univ., Japan
Hirata 2 and H. Yamada 1, 1 Kyoto
Univ. and 2 NAIST, Japan

M. Mühlberger, M. Haslinger, A.
Moharana, S. Kopp, T.
Mitteramskogler, E. Guillen and D.
Fechtig, PROFACTOR, Austria

30A-4-2

30B-4-2

30C-4-2

30D-4-2

9:30
Micro Cavity Surface Integrated
with a FlexibleTriboelectric
Nanogenerator

9:30
Quantum Transport and Robotic
Assembly of van der Waals
Junctions of Graphene and 2D
Materials (Invited)

9:30
Molecular-Scale Investigation ofSurface Structures and Propertiesof Functionalized Silica NanoParticles by 3D-AFM in Liquid

9:30
Stretchable Triboelectric
Nanogenerator with a NonStretchable Material Using Kirigami
Structure

S.-H. Chiu, G.-R. Chen and Y.-C.
Tsai, Natl. Chung Hsing Univ.,
TaiwanT. Machida 1,2, S. Masubuchi 1,
M. Onodera 1, Y. Seo 1, Y.
Wakafuji 1, S. Park 1, K. Kinoshita
1, R. Moriya 1, K. Watanabe 3, T.
Taniguchi 3, 1 Univ. of Tokyo, 2
JST-CREST and 3 NIMS, JapanS. Yamamura and E. Iwase,
K. Miyazawa 1, P.J. Molino 2, D.
Yang 2, M. Penna 2, B.R. Knowles Waseda Univ., Japan
2,4, S. MacLaughlin 2,4, T.
Fukuma 1, I. Yarovsky 2,4 and
M.J. Higgins 2, 1 Kanazawa Univ.,
Japan, 2 Univ. of Wloongong, 3
RMIT Univ. and 4 BlueScope
Innovation Labs., Australia

30A-4-3

30B-4-3

9:50
10:00
Incorporating Magnetism into 2D
Patterning, Mask Life andThroughput Improvements for High Materials for Innovative Functions(Invited)
Volume Semiconductor
Manufacturing Using Nanoimprint
Lithography

30C-4-3

30D-4-3

9:50
Simultaneous Atomic-Resolution
Flexuraland Torsional Imaging in
Liquidby Frequency Modulation
Atomic Force Microscopy

9:50
Development of Breathing
Monitoring System for Artificial
Ventilator in Animal Experiment

A. Kimura, Hiroshima Univ., Japan M. Umemoto, R. Kawamura, H.Y. H. Yoshida 1, Y. Hasegawa 1, K.
T. Yoshida 1, O. Morimoto 1, T.
Yoshikawa, S. Nakabayashi and N. Taniguchi 1, M. Matsushima 2, T.
Iwanaga 1, Y. Takabayashi 1, T.
Kobayashi, Saitama Univ., Japan Kawabe 2 and M. Shikida 1, 1
Hayashi 1, K. Sakai 1, W. Zhang 2,
Hiroshima City Univ. and 2 Nagoya
J. Choi 2, 1 Canon, Japan and 2
Univ., Japan
Canon Nanotechnologies, USA

30A-4-4

30C-4-4

10:10
Precision Bonding with The
Nanostructured Plastic Plate forMicrofluidics Chip
K. Kurihara 1,R. Hokari 1, T. Sato2, T. Sakura 3, S. Sugiura 1, K.
Miyake 1 and T. Kanamori 1, 1
AIST, 2 Stem Cell Evaluation
Technol. Res. Association and 3
Sumitomo Bakelite, Japan
Author's Interview: 12:15-12:25

10:10
10:10
Visualization of Nanoparticles in
B-Doped Al/Ni Multilayer Film for
Polymer Matrix by Scanning
Crack-less Reactive Bonding
Thermal Noise Microscopy
H. Tono 1, K. Kobayashi 1, Y.
D. Goto 1, Y. Kuntani 1, K.
Hirata 2, K. Kimura 1, H. Yamada Maekawa 1, S. Kanetsuki 2, S.
1, 1 Kyoto Univ. and 2 AIST, Japan Miyake 3 and T. Namazu 1, 1 Aich
Inst. of Technol., 2 Kobelco Res.
Inst. and 3 Kobe City College ofTechnol., Japan
Author's Interview: 12:05-12:15
Author's Interview: 10:30-10:40

Author's Interview: 11:45 11:55

30D-4-4

Room P2 (Dahlia, B2F)
Coffee BreakRoom A (Cosmos 1, B2F)
30A-5: Nanoimprint, Hybrid-NIL,
Biomimetics, and Functional
Surfaces II
Chairs:Y. Hirai (Osaka Pref. Univ.)
A. Miyauchi (Tokyo Medical and
Dental Univ.)

30A-5-1

Room B (Cosmos 2, B2F)
30B-5: Symp. C. 2D Materials II

Room C (Ran 1, B2F)
30C-5: NanoTool II

Room D (Ran 2, B2F)
30D-5: Nanofabrication I

Chairs:H. Omachi (Nagoya Univ.)
D. Kondo (Fujitsu Labs.)

Chairs:T. Hoshino (Hirosaki Univ.)
R. Kawamura (Saitama Univ.)

Chairs:Y. Darma (Inst. Technol. Bandung)
S. Shingubara (Kansai Univ.)

30B-5-1

10:45
10:45
Stimuli-Driven Delivery andUltrafast Photoluminescence from
Release of Materials Using
Epitaxial Bilayer Graphene on SiC
Particle-Armored Droplets (Invited)
S. Fujii, Osaka Inst. of Technol.,Japan

K. Saito, T. Koishi, J. Bao, W.
Norimatsu, M. Kusunoki, H.
Kishida and T. Koyama, Nagoya
Univ., Japan

30C-5-1

30D-5-1

10:45
Microresonator-Based
Photodetector of Near-Infrared
Light Using ElectrostaticTdK. Nakafuji,
A. Uesugi, K. Sugano

10:55
Artificial Two-Dimensional Polar
Metal by Charge Transfer to a
Ferroelectric Insulator (Invited)

and Y. Isono, Kobe Univ., Japan3 / 15

A. Ariando, Natl. Univ. ofSingapore, Singapore

MNC 2019, October 28-31, 2019, Hiroshima, Japan
30A-5-2

30B-5-2

30C-5-2

11:15
Fabrication and Optical
Characterization of a Wire-Grid
Polarizer for The Visible Light
Made of Metal Nanoink
R. Hokari 1, K. Takakuwa 2, H.
Kato 3, A. Yamamoto 4, Y.
Yamaguchi 4 and K. Kurihara 1, 1
AIST, 2 Ryoko Chemical, 3 Itoh
Optical Industrial and 4 Tokai
Seimitsu Industrial, Japan

11:05
Giant Power Factors in p- and nType Large-Area Graphene Filmson a Flexible Plastic Substrate

11:05
11:25
Development of Flexible Sponge
Quantification Method of Stress
Depth-Distribution by Micro-Raman Sensor Based on Sugar Cube andUsing CNT / PDMS Composite
Spectroscopy for Thin Film
Material
Nanomechanical Resonator
M. Saito, S. Warisawa and R.
A. Nakagawa 1, K. Ikeda 1, S.
Kometani, Univ. of Tokyo, Japan
Azhari 2, I. Sasaki 1, M.N.
Hamidon 2 and H. Tanaka 1, 1
Kyushu Inst. of Technol., Japanand 2 Univ. Putra Malaysia,
Malaysia

K. Kanahashi 1, M. Ishihara 2, M.
Hasegawa 2, H. Ohta 3 and T.
Takenobu 1,4, 1 Waseda Univ., 2
AIST, 3 Hokkaido Univ. and 4
Nagoya Univ., Japan

30D-5-2

30A-5-3

30B-5-3

30C-5-3

30D-5-3

11:35
Transfer Durability of High Aspect
Ratio Moth-Eye Structure Using
Release Agent and Partial-Filling
MethodJ. Kawaguchi and J. Taniguchi,
Tokyo Univ. of Sci., Japan

11:25
Asymmetric Carrier Accumulationin Van der Waals Heterostructureof Bilayer TMDCs by an ExternalElectric Field
M. Maruyama and S. Okada, Univ.
of Tsukuba, Japan

11:25
Effect of Gold Nanoparticle
Diameter on Raman Intensity of
DNA Oligomers toward Single
Nucleobase Detection
K. Murotani, K. Maruoka, A.
Uesugi, K. Sugano and Y. Isono,
Kobe Univ., Japan

11:45
Fabrication of Si Micropore andGraphene Nanohole Structures by
Focused Ion Beam for Biosensor
Application
N.N.N. Ibrahim and A.M. Hashim,
Univ. Teknol. Malaysia, Malaysia

30A-5-4

30C-5-4

30D-5-4

11:55
Stochastic Computational Study on
Curing Characteristics in UV
Nanoimprint Resin

11:45
Construction of Kinesin-Driven
Active Substratewith Improved
Uniformity and Reproducibility
toward Quantitative Analysis
K. Meguriya, T. Yokoyama, N.
Kobayashi, H.Y. Yoshikawa, S.
Nakabayashi and R. Kawamura,
Saitama Univ., Japan

12:05
Characterization of Unzipped
Graphene Nanoribbons by Using
Tip-Enhanced Raman Scattering
Spectroscopy
S. Hara 1, T. Inose 2, S. Toyouchi
3, H. Uji-i 2,3, H. Tanaka 1, 1
Kyushu Inst. of Technol., 2
Hokkaido Univ. and 3 KU Leuven,
Belgium
Author's Interview: 12:25 12:35

M. Koyama, J. Tsutsui, H.
Sunagawa, M. Shirai, H. Kawata,
Y. Hirai and M. Yasuda, Osaka
Pref. Univ., Japan
Author's Interview: 12:15-12:25

Author's Interview: 11:45 11:55

Author's Interview: 12:05-12:15
Lunch

Room A (Cosmos 1, B2F)
30A-6: Nanocarbons - Property

Chairs:S. Okada (Univ. of Tsukuba)
S. Chiashi (Univ. of Tokyo)

Room B (Cosmos 2, B2F)
Room C (Ran 1, B2F)
30B-6: Inorganic Nanomaterials - 30C-6: Nanodevices - Devices
Magnetics and Electronics
Based on Low Dimensional
Structure
Chairs:Chairs:I. Suzuki (Tohoku Univ.)
A. Higo (Univ. of Tokyo)
L. Nurdiwijayanto (NIMS)
T. Tanaka (Keio Univ.)

Room D (Ran 2, B2F)
30D-6: Nanofabrication II

Room P2 (Dahlia, B2F)
30P-6: Poster Session I, Group 1(13:40-15:40)

Chairs:Ariando (Natl. Univ. of Singapore)
A. Kohno (Fukuoka Univ.)

Page 5-6

30A-6-1

30B-6-1

30C-6-1

30D-6-1

13:40
Charge Carrier Doping and
Photoinduced Charge Transfer inLead Halide Perovskite Thin Films
and Devices (Invited)

13:40
In Situ Manipulation of Magnetic
Anisotropy in Fe3O4 Thin Film,Achieved with an Artificial
Multiferroic Device Using a SolidState Electrolyte

13:40
Next-Generation Applications of
Semiconductor Lasers (Invited)

14:00
Direct Formation of Highly Oriented
ZnO Nanocolumnars: Improvementin Electronic Properties ofStructure-Controlled ZnO Grown by
DC-Unbalanced Magnetron
Sputtering (Invited)

J.L. Blackburn, Natl. Renewable
Energy Lab., USA

W. Namiki 1,2, T. Tsuchiya 1, M.
Takayanagi 1,2, T. Higuchi 2 andK. Terabe 1, 1 NIMS and 2 Tokyo
Univ. of Sci., Japan

T. Kageyama, QD Laser, Japan

Y. Darma 1, S. Muhammady 1 andK. Takase 2, 1 Inst. Teknologi
Bandung, Indonesia and 2 Nihon
Univ., Japan

30A-6-2

30B-6-2

30C-6-2

30D-6-2

14:10
14:00
Higher Thermoelectric
Ferromagnetic-Oxide-Driven Spin
Performance in Metallic Nanotubes Filtering on SiliconThan Semiconducting Nanotubes
Y. Ichinose 1, A. Yoshida 1, K.
Horiuchi 1, K. Fukuhara 1, N.
Komatsu 2, W. Gao 2, Y.
Yomogida 1, T. Yamamoto 3, J.
Kono 2, and K. Yanagi 1, 1 Tokyo
Metropolitan Univ., Japan, 2 Rice
Univ., USA and 3 Tokyo Univ. of
Sci., Japan

R. Ohsugi, H. Omi, Y.
Krockenberger and A. Fujiwara,NTT, Japan

14:10
Enhanced Quantum Efficiency in
Mixed-Thickness ReS2/p-Si
Schottky Photodiode14:30
In-situ Cu Surface Cleaning Using
Hydrazine for Self-Aligned
Selective Area Deposition Using
thiol-Based Self-Assembled
B. Mukherjee 1, A. Zulkefli 1,2, R. S.M. Hwang 1, H.S. Kim 1, Y.C.
Jung 1, L.F. Peña 1, K. Tan 1, J.-F.
Hayakawa 1, Y. Wakayama 1,2
and S. Nakaharai 1, 1 NIMS and 2 Veyan 1, D. Alvarez 2, J.
Spiegelman 2 and J. Kim 1, 1 Univ.
Kyushu Univ., Japanof Texas and 2 Rasirc, USA

30A-6-3

30B-6-3

30C-6-3

14:30
Power Generation from The
Interface Between Graphene andFlowing Liquid Water

14:20
Temperature and Polarity
Dependence of Electrical
Properties of ZnO Film on
Pyroelectric LiNbO3 Single Crystal

14:30
14:50
Si-Nanowire-FET Sensor Detecting Metal-Assisted Chemical Etchingof Si Using Additives forHigh-Frequency MechanicalPreparation of Through-Si via
Oscillation of a MultilayerGraphene MEMS by Means ofReflecto Metry Technique

30D-6-3

T. Okada 1, G. Kalita 2, M.
Tanemura 2, I. Yamashita 3, F.S.
Ohuchi 4, M. Yeyyappan 5 and S.
Samukawa 1, 1 Tohoku Univ., 2
Nagoya Inst. of Technol., 3 Osaka
Univ., Japan, 4 Univ. of
Washington and 5 NASA Ames
Res. Ctr., USA

Y. Yasuhara 1,2, K. Kurishima
1,2,3, T. Chikyow 2, A. Ogura 1
and T. Nagata 2, 1 Meiji Univ., 2
NIMS and 3 JSPS, JapanK. Nishiguchi and A. Fujiwara,NTT, Japan

4 / 15

S. Hanatani, T. Yorioka, T.
Shimizu, T. Ito and S. Shingubara,
Kansai Univ., JapanMNC 2019, October 28-31, 2019, Hiroshima, Japan
30A-6-4

30B-6-4

30C-6-4

30D-6-4

14:50
14:40
Electrochemical Characterization Fabrication of a Magnesiumof CVD-Grown Graphene for MET Phosphate Electrolyte Film Using
Enzymatic Biofuel Cell Applications Atomic Layer Deposition

15:10
Comprehensive Reconsideration ofMaterial Property Modification by
Processing Plasma Exposure and
Its Optimal Control Strategy

K. Miki, T. Watanabe and S. Koh,
Aoyama Gakuin Univ., Japan

T. Hamano, T. Sumihira, K. Urabeand K. Eriguchi, Kyoto Univ.,
Japan

30A-6-5

14:50
Observation of SynchronizedCharge Behavior in a
Polyoxometalate Nanoparticle
Using a GaAs-Based Nanowire
Charge Detector
J. Su 1, T. Tsuruoka 1, T. Tsujita 2, S. Saito, K. Sasaki and S. Kasai,
Y. Nishitani 2, T. Hamanura 2, Y. Hokkaido Univ., Japan
Inatomi 2, K. Nakura 2, K. Terabe
1, 1 NIMS and 2 Panasonic, Japan

30B-6-5

15:10
15:00
Manipulating THz High-Harmonic Ozone Based High Temperature
Generation in Single-Wall Carbon Atomic Layer Deposition of SiO2
Nanotubes by Tuning Bandgap and Thin Films
Fermi Level
S.M. Hwang 1, Z. Qin 1, H.S. Kim
H. Nishidome 1, K. Nagai 2, K.
1, Y.C. Jung 1, S.J. Kim 2, B.K.
Uchida 2, Y. Ichinose 1, K.
Fukuhara 1, J. Eda 1, H. Okubo 1, Hwang 3 and J. Kim 1, 1 Univ. of
Y. Yomogida 1, K. Tanaka 2 and K. Texas, USA, 2 Kangwon Natl
Univ., Korea 3 Dupont, USA
Yanagi 1, 1 Tokyo Metropolitan
Univ. and 2 Kyoto Univ., Japan
Author's Interview: 15:30-15:40

Author's Interview: 15:20-15:30

Author's Interview: 15:10-15:20

Author's Interview: 15:30-15:40

Room P2 (Dahlia, B2F)

30P-6: Poster Session I, Group 1 (13:40-15:40, Oct. 30)
Chair: T. Harada (Univ. of Hyogo)

Photolithography and Patterning

30P-6-1

30P-6-2

30P-6-3All Integrated Mix & Match DirectWrite Nano- and Microlithography
Platform Based on Local Heat
Induced Sublimation of
Polyphthalaldehyde Resist

Micro-Processing of Silicon or
Glass Surfaces by Laser Ablation

Two-Layer Resist Process to
PrintThick Patterns by Exploiting
Matrix Projection Exposure Using a
Liquid-Crystal-Display Panel

Z. Wu 1, F. Holzner 1, A. Jehle 2, M. Saito, R. Igarashi and S.
D. Peter 2, S. Bisig 1, S. Bonanni Suzuki, Ryukoku Univ., Japan1, P. Paul 2 and U. Duerig 1, 1
SwissLitho, Switzerland and 2
Heidelberg Instruments, Germany
Electron and Ion Beam Technologies

T. Horiuchi, H. Okiyama, R. Satoand H. Kobayashi, Tokyo Denki
Univ., Japan

30P-6-4

30P-6-5

30P-6-32L

30P-6-33L

30P-6-34L

Estimation of Fogging Effect in EBeam Direct Writer

Investigation of Non-Charging
Exposure Condition in Electron
Beam Lithography

First Demonstration of 331-Beam
SEM

Electron-Optical Evaluation of a
Conically Shaped CNT Electron
SourceMeasurement of Absorbed Current
for Quantitative Evaluation of
Scattered Electrons in a ScanningElectron Microscope

X. Shao, A. Banerjee and A.
Khursheed, Natl. Univ. ofSingapore, Singapore

K. Morimoto, Y. Ito and M. Kotera,
Osaka Inst. of Technol., Japan

Chairs: H. Yamashita (NuflareTechnol.)Y. Kudo, H. Sasaki, Y. Takahashi, H. Mizuno, K. Kubo, K. Kozima and C. Riedesel, I. Müller, N.
M. Kotera, Osaka Inst. of Technol., Kaufmann, A. Adolf, N. Kämmer,
M. Takizawa, K. Sakamoto, S.
Japan
H. Fritz and D. Zeidler, Carl Zeiss
Shida and M. Seyama,
Microscopy, Germany
ADVANTEST, Japan

30P-6-35L
Self-Shielding Permanent RingMagnet Immersion Objective Lens
for Multi-Column Focused
Electron-Beam Systems
P. Balamuniappan 1, W.K. Ang 2,
A. Banerjee 1 and A. Khursheed 1,
1 Natl. Univ. of Singapore and 2
KLA, Singapore
Chair: A. Miyauchi (Tokyo Medical and Dental Univ.)

Nanoimprint, Hybrid-NIL, Biomimetics, and Functional Surfaces

30P-6-6

30P-6-7

30P-6-8

30P-6-930P-6-10

Investigation of Additive-Type
Fluorescence Moiré Fringes for
Imprint Alignment by Image
Drawing Software

Angles of Additive-Type Inclination
Characteristics of Droplet
Acceleration When Sliding on an Moiré Fringes for Fluorescence
Inclined Micro-Projection Surface Imprint Alignment
with Variable Viscosity and Surface
TensionFabrication of MEMS Mold with
Inclined Micro-Multi-Fin Structureand Shape Transfer to Resin by
Thermal Imprint Process

Effect of Amino-, Mercapto-Silane
Coupling as a Molecular Bridge of
Polyvinyl Chloride Ion-Selective
Membrane on Silicon Nitride for
Nitrate ISFET Sensors

M. Nakagawa and K. Suto, Tohoku T. Okawa, K. Fujishiro, S. Oshima, T. Yoshida, S. Ito, T. Nakamura
Univ., Japan
R. Sakuma and S. Imai, Nihon
and M. Nakagawa, Tohoku Univ.,
Univ., JapanJapan

T. Yahagi 1,2, H. Murayama 1, Y.
Watanabe 1 and T. Mineta 2, 1
Yamagata Res. Inst. of Technol.,and 2 Yamagata Univ., Japan

W. Chaisrirattanakul 1,2, W.
Bunjongpru 2, A. Pankiew 2, A.
Srisuwan 2, W. Jeamsaksiri 2, E.
Chaowicharat 2, M. Horprathum 2,
P. Saengdee 2, D. Phromyothin 1,
King Mongkut's Inst. of Technol.
Ladkrabang, and 2 NSTD, Thailand

5 / 15

MNC 2019, October 28-31, 2019, Hiroshima, Japan
30P-6-11

30P-6-12Integrationof a UV-Nanoimprint
Ion-Sensitive Field-EffectLithographytool into a
Transistors with Nanowire
Nanopositioning andChannels Manufactured by
Nanomeasuring Machine
Nanoimprint and NEMS
Technologies
S. Supreeti 1, M. Hofmann 1, I.W.
H.J.H. Chen 1,T.-N. Lee 2, S.-L.
Tseng 1, S.-Z. Chen 2 and P.-W. Rangelow 1, R. Mastylo 1, E.
Chiu 2, 1 Natl. Chi Nan Univ. and 2 Manske 1, M. Hoffmann 2, S.
Sinzingere 1, 1 TU Ilmenau and 2
Natl. Tsing Hua Univ., Taiwan
Ruhr Univ., Germany

30P-6-13
Functional Films Formed by Laser
Assisted Micro ParticleJetting

K. Suzuki 1, T. Satoh 1, K. Otomo
1, D. Yamakawa 1, T. Omori 1, M.
Takeda 1, K. Sato 1, N. Ishikawa 1,
I. Homma 1, E. Kaneda 2, S.
Koyama 1 and T. Kuriyagawa 3, 1
Natl. Inst. of Technol. Sendai
College, 2 ACSERA and 3 Tohoku
Univ., Japan
Chair: A. Miura (Hokkaido Univ.)

BioMEMS, Lab on a Chip, and Nanobiotechnology

30P-6-14

30P-6-15

Diameter Dependence of SingleWalled Carbon Nanotube with
Flavin Adenine Dinucleotide
Glucose Dehydrogenase for Direct
Electron Transfer Biosensor
A. Suzuki 1,2, H. Muguruma 1,2,
H. Iwasa 2,3, T. Tanaka 2, A.
Hiratsuka 1,2, K. Tsuji 3 and T.
Kishimoto 3, 1 Shibaura Inst. ofTechnol., 2 AIST and 3 TOYOBO,
Japan

Electrochemical Determination of Development of a Cell Culture
Quercetin Glucosides in Food with Substrate Replicating Surface
a Carbon Nanotube Electrode
Topography of Decellularized
Tissue30P-6-19+

H Mediated Control of ATP
Synthesis in Mitochondria with
Biotransducer
M. Cui, Y. Chen, C. Lin and T.
Miyake, Waseda Univ., Japan

30P-6-17

30P-6-18

A Device Having Micro Air-LiquidInterface for Analysis of Cells
Irradiated with Dielectric Barrier
Discharge Plasma

Development of the Separation
Method of Nanoparticles Using a
Micro-Nano Device

M. Suzuki and S. Kumagai, Meijo
S. Takahashi 1, H. Muguruma 1, N. T. Kimura 1, Y. Hashimoto 1, N.
Nakamura 2, A. Kishida 1, 1 Tokyo Univ., Japan
Osakabe 1, H. Inoue 2 and T.
Med. Dent. Univ. and 2 Shibaura
Ohsawa 2, 1 Shibaura Inst. of
Inst. Technol., Japan
Technol. and 2 Nippon Shizai,
Japan

K. Shimizu, M. Maeki, H. Tani, A.
Ishida, J. Nishi and M. Tokeshi,
Hokkaido Univ., Japan

30P-6-20

30P-6-16

30P-6-21

Fabrication of a Centrifugal BioDevelopment of Gd-DOTAConjugated Polymers as Neutron Microdevice Using 3D Lithography
Capture Therapy Agents with HighMRI Sensitivity
C.Y. Qin 1, X. Hou 1, N. Nitta 2, I. K. Suga and T. Suzuki, Gunma
Aoki 2, H. Yanagie 1 and H. Cabral Univ., Japan1, 1 Univ. of Tokyo and 2 NIRS,
Japan

30P-6-24

30P-6-36L
Surface Engineering of Mesoporous
Silica Nanoparticles toward Efficient
Drug Delivery Systems
T. Inose 1, I. Kotani 1, B. Fortuni 2,
M. Ricci 2, F. Taemaitree 3, K. Hirai
1, J. Hofkens 2, H. Kasai 3, H. Uji-I
1,2, 1 Hokkaido Univ., Japan, 2 KU
Leuven, Belgium and 3 Tohoku
Univ., Japan

Chair: S. Nagasawa (Shibaura Inst. of Technol.)Microsystem Technology and MEMS

30P-6-23

30P-6-22
Measurement of Trapping Time of
DNA Molecule in Nanofluidic
Entropy Trap Using DNA
Concentration
N. Azuma, S. Itoh, K. Fukuzawa
and H. Zhang, Nagoya Univ.,
Japan

30P-6-25

30P-6-26

30P-6-27

Pointer Extension Method for Real- Degradation Mechanism ofWorld Clicker System by Using
Sintered Porous Sliver Film at
MEMS Micro Mirror
Elevated Temperatures

Titanium/Silica Nanoparticles with
Tunable Exothermic Function

Soft Actuator with Large Volumetric
Change using Vapor-liquid Phase
Transition

T. Tatecho 1, S. Nagasawa 1 andS. Iwaki 2, 1 Shibaura Inst. ofTechnol. and 2 Hiroshima City
Univ., Japan

Direct Measurement of Strengthand Fracture Toughness for Al2O3
Hard Coating Film by Cantilever
Bending Test
Y. Mochizuki 1, K. Wakamoto 2, T. T. Ide 1, T. Tanibuchi 2, T.
Yamasaki 2 and T. Namazu 1, 1
Otsuka 2, K. Nakahara 2 and T.
Namazu 1, 1 Aichi Inst. of Technol. Aichi Inst. of Technol. and 2
KYOCERA, Japanand 2 ROHM, Japan

M. Shindo 1, K. Kiyohara 2, K.
Inoue 2 and T. Namazu 1, 1 Aichi
Inst. of Technol. and 2 Univ. of
Hyogo, Japan

T. Noguchi and F. Tsumori, Kyushu
Univ., Japan

30P-6-28

30P-6-29

30P-6-30

30P-6-31

Design and Fabrication of Active
Microfluidic Mixer Incorporating
Micropillar on Flexible Magnetic
Membrane
R.E. Pawinanto 1, S.N. Sabili 1, J.
Yunas 2, A.M. Hashim 1, 1 Univ.
Teknologi Malaysia, and 2 Univ.
Kebangsaan Malaysia, Malaysia

Development of MoS2:ZnO Based
Humidity Sensor with Direct
Insertion Transformer Oil

Near-Field Luminescence Sensing Introducing Dry Film Photoresistson Alumina for Engineering
as a Convenient Tool in Modern
Applications
Photolithography

Y.-B. Lee and K.-K. Lee, Ajou
Univ., Korea

T. Tomimatsu 1 and R. Takigawa
2, 1 Tohoku Univ. and 2 Kyushu
Univ., Japan

M. Nilsen 1and S. Strehle 2, 1 Ulm
Univ. and 2 Ilmenau Univ. ofTechnol., Germany

Room P2 (Dahlia, B2F)
Coffee BreakRoom A (Cosmos 1, B2F)
30A-7: Electron and Ion BeamTechnologies

Room C (Ran 1, B2F)
Room D (Ran 2, B2F)
Room P2 (Dahlia, B2F)
30C-7: BioMEMS - Diagnosis and 30D-7: Microsystem Technology 30P-7: Poster Session II, Group 2
Theraphyand MEMS II(16:00-18:00)

Chairs:H. Yamashita (NuflareTechnol.)

Chairs:T. Miyake (Waseda Univ.)

J. Yanagisawa (Univ. of Shiga

T. Takeuchi (Kobe Univ.)

Chairs:Y. Hasegawa (Hiroshima City
Univ.)
T. Nakakubo (Canon)

30A-7-1

30C-7-1

30D-7-1

16:00
Non-Charging Exposure Conditionsof Insulating Resist in Electron
Beam Lithography (Invited)

16:00
16:00
SU-8 Fabrication Process for Micro
Antibody-Conjugated Signaling
Nanocavities for Rapid Detection of Hexapod Robot with Wide Joint
Cancer-Related Intact Exosomes Ranges
Prepared by Novel Chemical
Nanoprocessing (Invited)

M. Kotera, K. Kubo, K. Kojima and
H. Mizuno, Osaka Inst. of Technol.,Japan

T. Takeuchi, Kobe Univ., Japan

K. Asamura and S. Nagasawa,
Shibaura Inst. of Technol., Japan

30A-7-2

30C-7-2

30D-7-2

16:30
Multi-Beam Mask Writer MBM1000 (Invited)

16:30
Structural Properties and Sensing
Performance of YTixOy Sensing
Membranes Prepared by Using
Sol-Gel Spin-Coating Method
T.-M. Pan 1,2, P.-L. Chiu 1, K.
Singh 1, B.-S. Lou 1, and J.-L. Her
1, 1 Chang Gung Univ., 2 Chang
Gung Memorial Hospital, Taiwan

16:20
Study on Vibrational
Communication System in
Ultrasonic Frequency Band

H. Matsumoto and H. Kimura,
NuFlare Technol., Japan

6 / 15

R. Takasawa and S. Nagasawa,
Shibaura Inst. of Technol., Japan

Page 7-9

MNC 2019, October 28-31, 2019, Hiroshima, Japan
30A-7-3

30C-7-3

17:00
Formation of Au Nano-Particles by
Au and Si Ion Implantation on SiO2
Films Using Au-Si Alloyed Liquid
Metal Ion Source and Thermal
Annealing under Atmosphere

16:50
16:40
Electrostatic Metallic Glass
Enzyme Free Microneedle Array
Micromirror Fabricated by The
Patch Composed of BoronateContaining Hybrid Hydrogel for On- Self-Aligned Structure
Demand Transdermal Insulin
Delivery

30D-7-3

Y. Okanishi, H. Shimizu, M.
Ichimiya and J. Yanagisawa, Univ.
of Shiga Pref., Japan

S. Chen 1,2, H. Matsumoto 1, Y.
Morooka 1, M. Tanaka 3, Y.
Miyahara 1, T. Suganami 3 and A.
Matsumoto 1,2, 1 Kanagawa Inst.
of Industrial Sci. and Technol., 2
Tokyo Medical and Dental Univ.
and 3 Nagoya Univ., Japan

30A-7-4

30C-7-4

17:20
Fabrication of Si Photonics
Waveguides by Thick Resist-Mask
Electron Beam Lithography
Proximity Effect Correction

17:10
Development of Polymeric Micelles
with 5-Boronopicolinic Acid Ligand
to Target Sialylated Epitopes inIntratumoral Microenvironment

M. Eissa, T. Mitarai, T. Amemiya,
N. Nishiyama and Y. Miyamoto,
Tokyo Inst. of Technol., Japan

T. Khan 1, K. Igarashi 1, A.
Matsumoto 2, H. Cabral 1 and K.
Kataoka 1,3, 1 Univ. of Tokyo, 2Tokyo Medical and Dental Univ.
and 3 iCONM, Japan

Z.-Y. Wang 1, Y.-Y. Chen 1, Y.-C.
Lin 2, T. Ono 3 and Y.-C. Tsai 1, 1
Natl. Chung Hsing Univ., Taiwan, 2Goertek Technol. Japan and 3
Tohoku Univ., Japan

30C-7-5
17:30
Relationship between Cancer Cell
Malignancy and Cell Adhesion
Forcestudied by Atomic ForceMicroscopy
K. Ishibashi 1,2, C. Nakamura 1,2,
H. Kim 1,2, 1 AIST and 2 Tokyo
Univ. Agric.Technol., Japan
Author's Interview: 17:40-17:50

Author's Interview: 17:50-18:00

Author's Interview: 17:00-17:10

Room P2 (Dahlia, B2F)
Coffee Break (15:30-16:00) and Poster Session II

30P-7: Poster Session II, Group 2 (16:00-18:00, Oct. 30)
Chair: K. Yanagi (Tokyo Metropolitan Univ.)

Nanocarbons

30P-7-1

30P-7-2

30P-7-3

30P-7-4

Polarity- and pH-Dependent Novel Mechanical Properties of CNT
N-Doped Green-Emitting Carbon under Uniaxial Tensile Strain
Dots with Switchable Fluorescence
Emission for Multifarious
M. Moniruzzaman and J. Kim,
K. Yoneyama, M. Maruyama, Y.
Gachon Univ., Korea
Gao.and S. Okada, Univ. of
Tsukuba, Japan

Hydrogen Gas Sensor Based on
Pd-decorated MWCNTs

Thermal Diffusivity of Buckypapers Energetics and Electronic Structures
Prepared from Nanotubes ofof N-Doped Graphene Nanoribbons
Various Electrical Conductivities
with Pyridinic and Graphitic Edges

30P-7-5

30P-7-6 Withdrawn

30P-7-7

30P-7-8

Preparationof Sandwich-likeCNs@rGO Nanocomposites with
Enhanced Microwave Absorption
Properties
Y. Cai, L. Sun and Q. Sun,
Nantong Univ., China

Study of The Reusability of Ir(111)/ Growth of MoS2 Crystals On 4Hα-Al2O3(0001) Substrates in
Sic Substrate for Photocatalytic
Application
Graphene CVD Growth

J.K. Kim 1,2, J. Lee 1,2, S.D. Kim K. Ueji, H. Matsuo, Y. Ichinose, Y. A. Yasum, Y. Gao, S. Okada and M.
Maruyama, Univ. of Tsukuba, Japan
1,2, H.K. An 1,2, S.H. Kong 1 and Yomogida and K. Yanagi, Tokyo
D. Jung 2, 1 Kyungpook Natl. Univ. Metropolitan Univ., Japanand 2 KITECH, Korea

A. Sakurai, M. Niki, T. Watanabe,
A. Sawabe and S. Koh, Aoyama
Gakuin Univ., Japan

P. Desai, A.K. Ranade, R.D.
Mahyavanshi, M. Shinde, B.
Todankar, M. Kato, M. Tanemura,
G. Kalita, 1 Nagoya Inst. ofTechnol., Japan

30P-7-10

30P-7-11

30P-7-51L

30P-7-52L

Size-Dependent Adhesion
Properties of The Carbon
Nanotube Gecko Tapes for
Micrometer-Scale Particles
K. Hirahara and H. Kano, Osaka
Univ., Japan

Multilayer Graphene Electrodes for
Few-Layer Two-Dimensional
Materials Field Effect Transistors
K. Hanyu, H. Tomori and A. Kanda,
Univ. of Tsukuba, Japan

30P-7-53L
Inducing Short Period Strain in
Graphene for Field EffectTransistor Application
M. Bando, R. Hiraide, H. Tomori
and A. Kanda, Univ. of Tsukuba,
Japan
Chair: Y. Ishikawa (Nara Inst. of Sci. and Technol.)

Nanodevices,

30P-7-930P-7-12High-Performance Photodetector
Single-Electron Transistor Made of GaAs Nanowires of Si for Its
Application to Photoanodes
with High on/off Ratio Based on
Arrays of Carbon-Coated Cobalt
Solution-Processed CarbonNanoparticles Assembled by
Nanodot Films
Dielectrophoresis
P.-H. Hsiao, T.-C. Wei, and C.-Y.
T. Ohno 1, M. Yukimune 1, R.
T. Yagai 1, M. Moribayashi 1, M.
Moriya 1, H. Shimada 1, A. Hirano- Fujiwara 1, Y. Wang 2, Z. Mi 2 and Chen, Natl. Cheng Kung Univ.,
F. Ishikawa 1, 1 Ehime Univ. and 2 Taiwan
Iwata 2, F. Hirose 3 and Y.
Univ. of Michigan, USA
Mizugaki 1, 1 Univ. of ElectroCommunications, 2 Tohoku Univ.
and 3 Yamagata Univ., Japan

7 / 15

30P-7-13

The Effect of the Anode Voltage on 2-Dimensional Nano-Arrays on
The UV A Cathodeluminescence
Antiferromagnetically Coupled CoPt
on a 2-inch AlGaN/GaN Wafer
Stacked Films for Magneto-Photonic
Crystals
M. Lee 1, N. Jang 1, S.K. Shim 2,3, H. Yamane 1, Y. Yasukawa 2 and
J.M. Park 3, J.K. Lee 2,3, 1 Korea M. Kobayashi 2, 1 Akita Industrial
Technol. Ctr. and 2 Chiba Inst. of
Maritime and Ocean Univ., 2
Technol., Japan
Chonnam Natl. Univ. and 3 SBKMaterials, Korea

MNC 2019, October 28-31, 2019, Hiroshima, Japan
30P-7-14

30P-7-15

Investigation on Switching
Characteristics of MetalFerroelectric-Metal Memory
Devices with Hafnium Zirconium
Oxides under Ferroelectric Film
Annealing
Y. Yin, T. Akahane and D. Nishijo, H.H. Chen 1, Z.Y. Huang 1, B.Y.
Gunma Univ., Japan
Shih 1, S.Y. Hsiung 1, W.C. Wang
1, Y.C. Fan 2, C.L. Lin 2, T.M. Lee
2, S.A. Wang 3, H.H. Hsu 2, C. Liu
1, C.H. Cheng 3, 1 Natl. ChiaoTung Univ., 2 Natl. Taipei Univ. ofTechnol. and 3 Natl. Taiwan
Normal Univ., Taiwan
Block-Copolymer-Based
Nanostructure Fabrication and Its
Application to Low-Power PhaseChange Memory

30P-7-16

30P-7-17

Ascorbic Acid Biofuel Cells Using
ABTS as an Electron Transfer
Mediator

Electrodes Modified by Single
Atomic Adlayer for Quantum
Transport: Superior MoleculeElectrode Coupling for the
Minimization of Contact ResistanceT. Ogino, K. Kuroishi and S. Imai,
Nihon Univ., Japan

M.-w. Gu and C.-h. Chen, Natl.
Taiwan Univ., Taiwan

Chair: T. Shimizu (Kansai Univ.)

Nanofabrication

30P-7-18

30P-7-19

30P-7-20

30P-7-21

30P-7-22

Post-Exposure Bake Effect on
Optical Characterization ofLinewidth and Gap Separation ofConcave Micromirror Array for
Microbial Cell Trapping Fabricated Robust Pt-Based Nanogap
Electrodes
by Laser Lithography and SUMP
MethodK. Daoudi, M. Kaidi, S. Coulambus, A. Matsutani and A. Takada, Tokyo R. Toyama, J. Kim and Y. Majima,
D. Zhang and H. Alawadhi, Univ. of Inst. of Technol., JapanTokyo Inst. of Technol., Japan
Sharjah, UAE

Reliable Operation of a Molecular- Stress Evaluation Induced by
Wiggling SiN Fine Patternby Using
Gap Atomic Switchin Vacuum
Achieved by Covering with an Ionic Raman Spectroscopy
Liquid30P-7-23

30P-7-24

30P-7-26

Inverse Design of Gap-Plasmon
Nanostructure via Deep Learning

Nano-Texturing of Silicon Plates by Enhanced Dielectric Permittivity in Electrical Characteristics of BaTiO3 Photocurrent Generation from
Laser-Chemical Processing
Au-BiFeO3/PVDF Nanocomposites Nanoparticles-Contained
Densely-Arranged Ag Nanoparticle
Assemblies on ITO Electrodewith Retaining Low Dielectric Loss Mesoporous Silica Thin Films
Tangent
M. Saito and S. Suzuki, Ryukoku P. Kum-onsa and P. Thongbai,
A. Kohno and T. Tajiri, Fukuoka
W. Liang, K. Sugawa and J. Otsuki,
Univ., Japan
Khon Kaen Univ., Thailand
Univ., Japan
Nihon Univ., Japan

Silver Nanoparticles/Silicon
Nanowires Structures for Surface
Enhanced Raman Spectroscopy
Sensors

J. Trisno, H.T. Wang, R.J.H. Ng
and J.K.W. Yang, 1 Singapore
Univ. of Technol. and Design,

30P-7-28

30P-7-54L

Magnetic Properties of Fe-Doped
CuCrO2 Electrospun Nanowires

Impact of Boron Doping into Si
Quantum Dots with Ge Core on
Their Photoluminescence
Properties

R. Yensano and T. Kamwanna , 1
Khon Kaen Univ., Thailand

30P-7-25

30P-7-55L

C. Arima 1, Y. Naitoh 2, H. Shima M. Koharada 1, R. Yokogawa 1,2, N.
2, H. Akinaga 2, T. Hasegawa 1, 1 Sawamoto 1, K. Yoshioka 1 and A.
Waseda Univ. and 2 AIST, Japan Ogura 1, Meiji Univ. and 2 JSPS
Res., Japan

30P-7-27

30P-7-56L

Performance Improvement of AllStructure and Conductance ofAtomic-Sized PtIr Wires Studied by Inorganic Quantum-Dot Light
Emitting Diodes by Dopingin Situ Transmission Electron
Magnesium into SolutionMicroscopy
Processed Nickel Oxide
Nanoparticles
K. Makihara, S. Fujimori, M. Ikeda, Y. Ochiai, T. Obi, Y. Tsuruoka and H.-Y. Pan 1,2, C.-W. Lee 1,2, Z.-H.
A. Ohta and S. Miyazaki, Nagoya T. Kizuka, Univ. of Tsukuba, Japan Wu 1,2, C.-C. Yang 2 and Y.-K. Su
Univ., Japan
1,2, 1 Natl. Cheng Kung Univ. and2 Kun Shan Univ., Taiwan
Chair: T. Tsuchiya (NIMS)

Inorganic Nanomaterials

30P-7-29

30P-7-30

30P-7-31

Fabrication and Photocatalytic
Properties of Nano-/Micro-MetalOrganic Framework Materials
W.-Y. Sun, Nanjing Univ., China

Theoretical Modeling of Electrode
Overvoltage in All Solid-StateElectrochemical Device
K. Kobayashi and T.S. Suzuki,
NIMS, Japan

Magnetic Behavior of One-Step
Crack Formation and Mechanical
Synthesized Iron Sulfide
Properties in Sol-Gel Derived
Nanoparticles without Hot Injection Titania Films
C.-H. Huang, Y.-C. Chang, C.-L.
K. Higashi and T. Yasuda, Kyushu
Pan, C.-R. Lin, Natl. Pingtung
Inst. of Technol., Japan
Univ., Taiwan

30P-7-32

30P-7-34

30P-7-35

30P-7-36

Low-Cytotoxic SERS-Based
Intracellular pH Sensing Using
Gold Coated Silver Nanoflowers

Preparation and Magnetic
Interaction in the CarbonEncapsulated Cobalt-Containing
Nanocomposites

Vertically-Structured Ionic
Band Alignment at Non-Polar
AlN/MnS Interface Investigated by Decision-Maker for Improved
Scalability
Hard X-ray Photoelectron
Spectroscopy

A Mesoporous SiO2-Based Ionic
Decision-Maker for Solving MultiArmed Bandit Problems

Q. Zhang 1, K. Watanabe 1, I.
Kotani 1, B. Fortuni 2, T. Farsai 3,
H. Kasai 3, J. Hofkena 2, K. Hirai
1, T. Inose 1 and H. Uji-i 1,2, 1
Hokkaido Univ., 2 KU Leuven,
Belgium, 3 Tohoku Univ., Japan

B.-Y. Chen, C.-L. Pan, S.Y. Hsu,
Y.-T. Tseng and C.-R. Lin, Natl.
Pingtung Univ., Taiwan

K. Kurishima 1,2,3, K. Tatejima 3, Y. Kitagawa 1,2, T. Tsuchiya 1,2,
M. Takayanagi 1,2, D. Etoh 1,2, T.
Y. Yamashita 1, S. Ueda 1, K.
Tsuruoka 1, T. Higuchi 2 and K.
Ishibashi 4, K. Takahashi 4, S.
Suzuki 4, A. Ogura 3, T. Chikyow 1 Terabe 1, 1 NIMS and 2 Tokyoand T. Nagata 1, 1 NIMS, 2 JSPS, Univ. of Sci., Japan
3 Meiji Univ. and 4 COMET, JapanD. Etoh 1,2, T. Tsuchiya 1,2, Y.
Kitagawa 1,2, M. Takayanagi 1,2,
Y. Itoh 1, T. Tsuruoka 1, T. Higuchi
2 and K. Terabe 1, 1 NIMS an 2
Tokyo Univ. of Sci., Japan

30P-7-39

30P-7-40 Withdrawn

Raman and EDX Analysis for MoS2 Reliable and Enhanced Emission
from All-Inorganic CsPbBr3
Sputtered Films
Quantum Dots

30P-7-37

30P-7-33 Withdrawn
Microwave-Assisted Synthesis of
Nd-Doped BiOBr Flowers and Their
Photocatalytic Performance
S. Jaita 1, S. Thongtem 2, A.
Phuruangrat 3, S. Thanasanvorakun
1, T. Thongtem 2 and P.
Dumrongrojthanath 1, 1
Rajamangala Univ. of Technol., 2
Chiang Mai Univ. and 3 Prince ofSongkla Univ., Thailand

30P-7-57L
Magnetic and Optical Properties ofSurface Modification MagneticFluorescent Nanoparticles

Z. Liu 1, Z. Hu 2, J. Du 1, X. Tang Y.-Z. Chen 1, C.-L. Pan, H.-S. Hus,
N. Hasuike 1, S. Yamauchi 1, K.
Y.-T. Tseng, C.-R. Lin, Natl.
Nishio 1, S. Kamoi 2 and K. Kisoda 2 and Y. Leng 1, 1 Chinese
3, 1 Kyoto Inst. of Technol., 2
Academy of Sci. and 2 Chongqing Pingtung Univ., Taiwan
Kyoto Pref. Technol. Ctr. and 3
Univ., China
Wakayama Univ., Japan

8 / 15

30P-7-38

MNC 2019, October 28-31, 2019, Hiroshima, Japan
Chair: R. Hayakawa (NIMS)

Organic Nanomaterials

30P-7-41

30P-7-42

30P-7-43

30P-7-44

Photoalignment Control of Sub-10
nm Lamellar Structure of Random
Copolymers with Azobenzene andOligo(Methyl Methacrylate) Side
ChainsProton Conductive Performance of
Shell Thickness Controlled CoreShell Type Nanoparticles
Fabricated by RAFT
Polymerization with Particles

Long-Range Ordered Hetero
Smectic Lamellar Structure
Induced by Random Copolymers
with Liquid Crystalline and Alkyl
Side Chain

Schiff Base Molecule Modified with Mesogenic Aggregation Properties
Rhodamine as Fluorescentin Hetero Smectic Lamellar
Detection for Manganese (II) Ion
Structure Affected by Side-Chain
Liquid Crystalline Polymer Structure

R. Higashi, M. Hara, S. Nagano
and T. Seki, Nagoya Univ., Japan

K. Tabata 1, T. Nohara 1, K.
Koseki 1, K. Umemoto 1, R. Sato
1, T. Arita 2 and A. Masuhara 1, 1
Yamagata Univ. and 2 Tohoku
Univ., Japan

K. Takishima, M. Hara, S. Nagano K. Chattrairat 1, P. Leepheng 1
and T. Seki, Nagoya Univ., Japan and D. Phromyothin 1, 1 King
Mongkut's Inst. of Technol.
Ladkrabang, Thailand

30P-7-46

30P-7-58L

Crystallization-Induced Emission of Centimeter-Scale Bright MAPbBr3
Azobenzene-Pyrene Dyad
Nanocrystalline Thin Film LED with
Uniform Luminescence Intensity
and Long-Term Stability
K. Yokoyama, M. Yamauchi, S.
Masuo, Kwansei Gakuin Univ.,Japan
NanoTool

30P-7-47

K.W. Sun, Natl. Chiao Tung Univ.,
TaiwanChair: O. Kubo (Osaka Univ.)

30P-7-48

30P-7-49

30P-7-50

Dependence of Particle Adhesion Experimental Study on Molecularon Surface Roughness of Chamber Fluctuations of Biomolecules byWall Evaluated by Atomic Force
Force Spectroscopy
Microscopyfor Reducing Particles
in Semiconductor Apparatuses
A. Doi 1, N. Satoh 1, H. Yamamoto T. Miwa 1, G. Miya 2 and S. Kanno Y. Yamamoto, H. Kominami, K.
2, 1 Hitachi and 2 Hitachi HighKobayashi and H. Yamada, Kyoto
1, Y. Miyato 2, H. Nozaki 2, H.
Technol., Japan
Univ., Japan
Nakamoto 2 and Y. Terui 2, 1
Chiba Inst. of Technol. and 2
Toshiba Nanoanalysis, Japan
Observation of Power
Semiconductor Devices on CrossSectional Surface by Scanning
Probe Microscope

Room P1 (Himawari, B2F)
18:20-20:20 Banquet, Cello and Soh Performance

9 / 15

Design and Fabrication of a High
Speed Atomic Force Microscope
Scan-Head

L.O. Otieno 1, B.O. Alunda 2, S.J.
Park 1 and Y.J. Lee 1, 1
Kyungpook Natl. Univ., Korea andTaita Taveta Univ., Kenya

30P-7-45

M. Furuichi, M. Hara, S. Nagano and
T. Seki, Nagoya Univ., JapanMNC 2019, October 28-31, 2019, Hiroshima, Japan

Thursday, October 31
Room A (Cosmos 1, B2F)
31A-8: Nanocarbons - Devices

Room B (Cosmos 2, B2F)
Room C (Ran 1, B2F)
Room D (Ran 2, B2F)
31B-8: Inorganic Nanomaterial - 31C-8: Nanodevices - Functional 31D-8: Nanofabrication III
Functional Nanomaterial
Devices by Advanced Materials

Room P2 (Dahlia, B2F)
31P-8: Poster Session III, Group 1(9:30-11:30)

Chairs:T. Takenobu (Nagoya Univ.)
M. Tanemura (Nagoya Inst. ofTechnol.)

Chairs:T. Tsuchiya (NIMS)
L. Nurdiwijayanto (NIMS)

Page 11-12

Chairs:F. Ishikawa (Ehime Univ.)
M. Seki (Univ. of Tokyo)

Chairs:T. Okada (Tohoku Univ.)
K. Tomioka (Hokkaido Univ.)

31A-8-1

31B-8-1

31C-8-1

31D-8-1

9:30
Memory Effect in Atomic
Monolayers and Applications from
Neuromorphic Computing to RF
Switches (Invited)

9:30
Study and Fabrication of Flexible
Zr-Based Metallic Glass Thin Film
Strain Gauge

9:30
Applied External Magnetic Field
Dependence of Magnetic Domain
Structures in Patterned CoFe Thin
Films on GaAs (001) Substrates

9:30
Diffusion Barrier Height-Controlled
Reduction of an Operating Bias ofa Ag/Ta2O5/Pt Gapless-Type
Atomic Switch

S. Hus and D. Akinwande, Univ. of Y.-C. Lu, C.-Y. Chiang, Y.-C. Chen K. Teramoto 1, R. Horiguchi 1, Y. M. Mikami 1, N. Tanahashi 1, T.
Texas, USA
and Y.-C. Tsai, Natl. Chung Hsing Adachi 2, M. Akabori 2 and S. Hara Tsuruoka 2 and T. Hasegawa 1, 1
Univ., Taiwan
1, 1 Hokkaido Univ. and 2 JAIST, Waseda Univ. and 2 NIMS, JapanJapan

31A-8-2

31B-8-2

10:00
Detection of Methanethiol at Low
Concentration by Chemical
Reactions on Graphene FET

9:50
Controllable Fabrication of
Functional Nanostructures with
Gas Phase Cluster Beam
Deposition
Y. Sakamoto, T. Ikuta and K.
S. Zhang, M. Chen, C. Liu, J.
Maehashi, Tokyo Univ. of Agri. and Wang, M. Han, Nanjing Univ.,
Technol., Japan
China

31C-8-2

31D-8-2

9:50
9:50
C-N-Codoped Sb2Te3
Fabrication and Characterization of
Chalcogenides for Reducing Power Piezoresistive Pressure Sensor
Using Minimal-Fab ICP-RIE andConsumption of Phase-Change
Mask Aligner
DevicesY. Yin, Gunma Univ., Japan
Y.X. Liu, H. Tanaka, K. Koga, M.
Nemoto, S. Khumpuang, M.
Nagao, T. Matsukawa and S. Hara,
AIST, Japan

31A-8-3

31B-8-3L

31C-8-3

10:20
Electrical Characteristics of Gate
Tunable Graphene Lateral Tunnel
Diodes

10:10
Silicon Nanostructures for
Directional Emission and MultiSpectral Detection of Light

10:10
10:10
Elucidation of Different Dopants on Fabrication of GaN Nanowires by
Wet Etching Using Electrodelessthe Morphology of
Photo-Assisted Electrochemical
Electrochemically Synthesized
Etching and Alkaline Solution
Polypyrrole Nanofibers towards
Treatment
Glucose Biosensing Applications

31D-8-3

J. Ho 1, Z. Dong 1, M. Wu1, A.I.
P. Jakhar and V. Singh, Indian Inst. M. Shimauchi, K. Miwa, M.
K. Shiga 1, T. Komiyama 2, Y.
Toguchi, T. Sato and J. Motohisa,
Fuse 2, H. Fukidome 2, A. Satou 2, Kuznetsov 1 and J.K. W. Yang 1,2, of Technol. Indore, India
1 A*STAR and 2 SUTD, Singapore
Hokkaido Univ., JapanT. Otsuji 2 and T. Uchino 1, 1
Tohoku Inst. of Technol. and 2
Tohoku Univ., Japan

31A-8-4

31B-8-4

10:40
Room-Temperature Printing of
CNTs-Based Flexible TFTs withHigh Performance

10:30
10:30
10:30
Towards Hybrid Black Silicon Solar Flexible Mechanical Sensors with InAs/InP Core-Shell Nanowire
Channel for High-Mobility Vertical
Cells Based on Solution-Processed Ultrahigh Resolutions Based on
Heterostructures
Percolative Conductions in Metallic Surrounding-Gate Transistors
Nanoparticle Arrays
C.-Y. Chen, Natl. Cheng Kung
M. Chen, W. Luo, Z. Du and M.
H. Gamo, J. Motohisa and K.
Univ., Taiwan
Han, Nanjing Univ., China
Tomioka, Hokkaido Univ., Japan

Q. Sun 1, W. Li 1, X. Liu 1,2, M.
Kanehara 3, J. Zhao 4 and T.
Minari 1, 1 NIMS, Japan, 2Zhengzhou Univ., China and 3
Colloidal Ink, China

31A-8-5
11:00
Trion-Based High-Speed
Electroluminescence Emitters with
Carbon Nanotube Films
H. Takahashi 1, Y. Suzuki 1, N.
Yoshida 1, K. Nakagawa 2 and H.
Maki 1, 1 Keio Univ., 2 KISTEC,Japan
Author's Interview: 11:20-11:30

31C-8-4

31D-8-4

Withdrawn
Preparation of AgCl-TiO2
Nanotubes for Removing Arsenate
and Arsenite in Aqueous
C.-Y. Tsai and C.-W. Liu, Natl.
Taiwan Univ., Taiwan
Author's Interview: 10:50-11:00

Author's Interview: 10:50-11:00

10 / 15

Author's Interview: 10:50-11:00

MNC 2019, October 28-31, 2019, Hiroshima, Japan
Room P2 (Dahlia, B2F)

31P-8: Poster Session III, Group 1 (9:30-11:30, Oct. 31)
Chair: K. Asakawa (KIOXIA)

Photolithography and Patterning

31P-8-1

31P-8-2

31P-8-3

Thermo-Mechanical
Multilayer Absorber Phase ShiftCharacteristics of ParticleMask Using Platinum for HighContaminated Pellicle Membrane
Numerical Aperture Extreme
for Extreme Ultraviolet Lithography
Ultraviolet Lithography
J.J. Santillan 1, N. Uemori 2, H.
D. Jeong, J.S. Kim, Y.J. Han and J. D. Jeong, Y.J. Jang, S.J. Wi, H.N.
Yamaoka 2 and T. Itani 1, 1 Osaka Ahn, Hanyang Univ., Korea
Kim and J. Ahn, Hanyang Univ.,
Univ. and 2 Marubun, Japan
Korea
Extremely Large Depth-of-Focus
Lithography System Using KrF
Excimer Laser

Chair: K. Okamoto (Osaka Univ.)

Resist and Directed Self-Assembly

31P-8-4

31P-8-5

31P-8-31L

Patterning of Functional Materials
in Line with Photosensitive
Template Geometry

Elemental Depth Profiles ofSequential Infiltration SynthesisTreated Resist Thin Films
Analyzed by Time-of-Flight
Secondary Ion Mass Spectrometry

Stochastic Simulation of Shot
Noise Effects for Chemically
Amplified Resist in Extreme
Ultraviolet Lithography

S. Ito, Y. Ozaki, T. Nakamura andH. Sugita, S. Ishikawa, J.
M. Nakagawa, Tohoku Univ.,
Takahashi, M. Wada, H.
Matsumoto and K. Matsuda, JSR, JapanJapan
Nanoimprint, Hybrid-NIL, Biomimetics, and Functional Surfaces

K. Fukunari, M. Koyama, M. Shirai,
H. Kawata, Y. Hirai and M.
Yasuda, Osaka Pref. Univ., Japan

31P-8-6

31P-8-8

31P-8-7

Chemical Registration to Prepare Adjustable Nerve GuidanceDefined-Shape UV-Cured Films in Conduits with Inside Micro/Nano
Print-and-Imprint Method
Groove Patterns

M. Nakagawa, K. Ochiai, A.
J.-H. Lin 1, A.F. Yee 2 and F.-Y.
Onuma, K. Suto, T. Nakamura and Chang 1, 1 Natl. Taiwan Univ. of
S. Ito, Tohoku Univ., Japan
Sci. and Technol., Taiwan and 2
Univ. of CA, USA

31P-8-11

31P-8-12

Chair: A. Miyauchi (Tokyo Medical and Dental Univ.)

31P-8-9

31P-8-10

Fine Flexible Through Electrodes Anti-Fouling Micro-Lens Array with
An Experimental and Theoreticalfor Printed Devices Using Silver Ink Antireflection Structure by Ultraviolet
Study of Molecularly Imprinted
Nanoimprint Lithography
Electrode Based on Methyl
Methacrylate Polymer for Pesticide
Detection
P. Leepheng 1, W. Homchan 1, S. K. Honjo and J. Taniguchi, Tokyo M. Nakamura 1, S. Hiwasa 2 and J.
Taniguchi 1, 1 Tokyo Univ. of Sci.
Suramitr 2 and D. Phromyothin 1, 1 Univ. of Sci., Japanand 2 Autex, Japan
King Mongkut's Inst. of Technol.
Ladkrabang and 2 Kasetsart Univ.,
Thailand

31P-8-13

31P-8-32L

High-Refractive Index Materials for Multi-Step Imprinting Process with Study on De-Molding
Fabrication of Photonic
in-Plane Compression Method
Characteristics of Resins in
Nanostructures
Nanoimprint

Fabrication and Characteristics of
PCL Membrane Containing
Strontium-Substituted
Hydroxyapatite Nanofibers for
Guided Bone Regeneration

C. Pina-Hernandez 1, S. Cabrini 2, T. Miyata, K. Tokumaru and F.
Tsumori, Kyushu Univ., JapanK. Munechika 1, 1 HighRI Optics
and 2 Lawrence Berkeley Natl.
Lab., USA
BioMEMS, Lab on a Chip, and Nanobiotechnology

H. Kawata, J. Tsutsui, M. Shirai, M. W.-X. Yu, Y.-W. Hsu and F.-Y.
Yasuda and Y. Hirai, Osaka Pref. Hsu, Natil. Taiwan Ocean Univ.,
Univ., Japan
Taiwan31P-8-14

31P-8-15

31P-8-16

31P-8-17

Method of Fabrication of
Microneedle Using Biodegradable
UV Curable Resin Polyanhydride

Stretching of DNA Molecules
Migrating through a Nanoslit byElectrophoresis and Its
Dependence on Voltages

A Microfluidic Cube for Extractionof White Blood Cells

K. Yasuda, K. Sugisaki, T.
Shimoda, Y. Nakamura and S.
Imai, Nihon Univ., Japan

H. Nagata, S. Itoh, N. Azuma, K.
Fukuzawa and H. Zhang, Nagoya
Univ., JapanS. Zhu, D. Tang, N. Xiang and Z.
Ni, Southeast Univ., China.

Dual-Targeted Nanoparticle Delivery
Interdigitated and Wave-Shaped
System for Improving Drug
Electrode Based Capacitivesynergistic Therapy in Orthotopic
Sensor for Label-Free and RealTime Monitoring of Antibiotic Effect Prostate Tumor Modelon E.coli
J. Park, Y. Lee, Y. Hwang and S. Y.-H. Lin, P.-Y. Chu and H.-Y. Ko,
Cho, Gachon Univ., Korea
Natl. Yang-Ming Univ., Taiwan

31P-8-19

31P-8-20

31P-8-21

31P-8-22 Withdrawn

Fluorescence Imaging of a Single Surface Modification Process on
Microreactor Array Chip for HighExosome with a Bull's Eye-Type
Plasmonic Chip under The Upright Throughput Screening
Microscope
S. Sato 1, S. Ueno 1 and T. Ichiki
E. Fujimoto 1, K. Mori 2, T.
1,2, 1 iCONM and 2 Univ. of
Takeuch 2 and K. Tawa 1, 1
Kwansei Gakuin Univ. and 2 Kobe Tokyo, Japan
Univ., Japan

Chair: S. Kumagai (Meijo Univ.)

31P-8-18

31P-8-33L

Magnetic Actuator Using Extremely Dissolving Poly-Gamma-Glutamate Development of Bioabsorbable
Tough Gel Material
Microneedles with High Aspect
Microneedles for Reducing the
Ratio: Fabrication Process andSymptoms of Atopic Dermatitisin
Insertion Test
Nc/Nga MiceS. Shigetomi and F. Tsumori,
M.-C. Chen and C.-S. Chen, Natl. Y. Kanda 1, H. Takehara 1,2 and T.
Kyushu Univ., Japan
Ichiki 1,2, 1 Univ. of Tokyo and 2
Cheng Kung Univ., Taiwan
iCONM, Japan

31P-8-34L
Fabrication of AuNP-Modified
Nanoarrays toward High-Sensitivity
Measurement of Single
Nanobioparticles
A. Iwaya 1, H. Kuramochi 1, H.
Kishita 1, H. Takiguchi 1 and T.
Ichiki 1,2, 1 Univ. of Tokyo and 2
iCONM, Japan

11 / 15

MNC 2019, October 28-31, 2019, Hiroshima, Japan
Chair: S. Nagasawa (Shibaura Inst. of Technol.)Microsystem Technology and MEMS

31P-8-23

31P-8-24

31P-8-25

31P-8-26

Influence of Bonded Area Size on Miniaturization of Worm-Like Soft
Cracking in Reacted Nial Layer for Robot Actuated by Magnetic Field
Crack-Free Reactive Soldering

31P-8-27

Mechanical-Shock-Induced
Vacuum Emission in MEMS
Exothermic Reaction in Ti/Si
Fracture Fabricated, GapMultilayer Nanofilms for Low-Power Controlled Si Nano Electrodes
Reactive Bonding
K. Maekawa 1, S. Ito 2, D. Goto 1, K. Maeda and F. Tsumori, Kyushu Y. Kuntani 1, D. Goto 1, K.
A. Banerjee, Y. Hirai, T. Tsuchiya
Univ., Japan
Maekawa 1, K. Kodama 1, S.
Y. Kuntani 1 and T. Namazu 1, 1
and O. Tabata, Kyoto Univ., Japan
Kanetsuki 2, S. Miyake 3 and T.
Aichi Inst. of Technol. and 2 Univ.
Namazu 1, 1 Aichi Inst. ofof Hyogo, Japan
Technol., 2 Kobelco Res. Inst. and3 Kobe City College of Technol.,Japan

Development of Bidirectional Driven
Tensile Test Technique for Thin
Films

31P-8-28

31P-8-36L

31P-8-29

31P-8-30

31P-8-35L

K. Ogane, T. Suzuki, M. Nomura
and T. Fujii, Akita Pref. Univ., Japan

Fabrication and Study of
Miniaturized Soft Pneumatic
Robotic Finger

Pt Plasma Atomic Layer Deposition Electrostatic Comb Drive
Design and Implementation of
Development of Thermal Flowfor Micropore X-Ray Optics
Micromirror Integrated Metallic
CMOS-Based Piezoresistive Strain Sensor for Respiration
Fabricated with Silicon Deep
Glass Torsional Structure
GaugesMeasurement
Reactive Ion Etching
Y. Kawamoto, Y. Hasegawa, K.
T.-Y. Cheng, P.-C. Huang, K.-Y.
A. Fukushima 1, D. Ishii 1, Y. Ezoe Y.-Y. Chen 1, Z.-Y. Wang 1, Y.-C. S.-H. Tseng, Y.-J. Wang, H.-H.
Huang and Y.-C. Tsai, Natl. Chung 1, K. Ishikawa 2, M. Numazawa 1, Lin 2, T. Ono 3 and Y.-C. Tsai 1, 1 Tsai and Y.-Z. Juang, Natl. Applied Taniguchi, and M. Shikida,
Hiroshima City Univ., Japan
Hsing Univ., Taiwan
R. Otsubo 1, H. Suzuki 1, T. Yuasa Natl. Chung Hsing Univ., Taiwan, 2 Res. Labs., Taiwan
Goertek Technol. Japan and 3
1, S. Sakuda 1, T. Uchino, K.
Tohoku Univ., Japan
Mitsuda 2 and M.J. Sowa 3, 1
Tokyo Metropolitan Univ., 2 ISASJAXA, Japan and 3 Veeco CNT,
USA
Lunch

Room A (Cosmos 1, B2F)
Room B (Cosmos 2, B2F)
Room C (Ran 1, B2F)
31A-9: Nanoimprint, Hybrid-NIL, 31B-9: Resist and Directed Self- 31C-9: Bio Nano MEMS
Biomimetics, and Functional
Assembly
Surfaces II

Room D (Ran 2, B2F)
Room P2 (Dahlia, B2F)
31D-9: Microsystem Technology 31P-9: Poster Session IV, Group 2
and MEMS III(13:00-15:00)

Chairs:A. Miyauchi (Tokyo Medical and
Dental Univ.)
Y. Hirai (Osaka Pref. Univ.)

Page 13-14
Chairs:S. Nagasawa (Shibaura Inst. ofTechnol.)
T. Namazu (Aichi Inst. of Technol.)

Chairs:T. Nagai (JSR)
S. Nagahara (Tokyo Electron)

Chairs:A. Matsumoto (Tokyo Medical and
Dental Univ.)
K. Morishima (Osaka Univ.)

31A-9-1

31B-9-1

31C-9-1

31D-9-1

13:00
Solution-Processable Fabricationof Integrated Fabry-Perot
Absorbers for Multi-Color Printing

13:00
Theoretical Study on Trade-off
Relationships between Resolution,Line Edge Roughness, andSensitivity in Resist Processes for
Semiconductor Manufacturing by
Extreme Ultraviolet Lithography(Invited)

13:00
Construction and Functional
Emergence of BioactuatedMicroNanoSystem and Living
Machined Wet Robotics (Invited)

13:00
First Demonstration of Lobster Eye
X-Ray Optics Fabricated with Deep
Reactive Ion Etching

S. Baek, K. Kim, Y. Sung, P. Jung T. Kozawa, Osaka Univ., Japanand H. Lee, Korea Univ., Korea

31A-9-2

31B-9-2

13:20
13:30
Directed Self-Assembly of BlockSuperhydrophobic and
Copolymers on ChemicallySuperoleophobic Property
Modified Graphene (Invited)
Enhancement on Guard Ring
Micro-Patterned PDMS with Simple
Flame Treatment
S.O. Kim, KAIST, Korea
N. Atthi, W. Sripumkhai, P.
Pattamang, O. Thongsook, S.
Suntalelat, J. Jantawong, R.
Meananeatra, J. Supadech, N.
Klunngien and W. Jeamsaksiri,
NECTEC, Thailand

K. Morishima, Osaka Univ., Japan R. Otsubo 1, Y. Ezoe 1, K.
Ishikawa 2, M. Numazawa 1, D.
Ishii 1, A. Fukushima 1, H. Suzuki
1, T. Yuasa 1, S. Sakuda 1, T.
Uchino 1 and K. Mitsuda 2, 1
Tokyo Metropolitan Univ. and 2
ISAS-JAXA, Japan

31C-9-2

31D-9-2

13:30
Wearable High-Powered Biofuel
Cells Using Enzyme/Carbon
Nanotube Composite Fibers on
Textile Cloth

13:20
Development of Wireless
Underground SAW Sensor
Measurement System Using
Magnetic Antenna

S. Yin, W. Yetianqing, L. Xiaohan, S.-H. Kim, A.M. Ridwan and K.K.
T. Miyake, Waseda Univ., Japan
Lee, Ajou Univ., Korea

31A-9-3

31B-9-3

31C-9-3

13:40
Fabrication of Hyaluronic Acid
Hollow Microneedle Array

14:00
Polymer Designs for Dense Metal
Infiltration

13:50
13:40
Metallic Glass Thin Film Integrated Shock Characteristics of MEMS
Inertial Sensors Developed bywith Flexible Membrane for
Ti/Au Multi-Layer Metal Technology
Electromagnetic Micropump
Application

31D-9-3L

S. Terashima, C. Tatsukawa, T.
takahashi, M. Suzuki and S.
Aoyagi, Kansai Univ., Japan

N. Sasao, K. Asakawa and S.
Sugimura, KIOXIA, Japan

Y.-F. Huang, C.-H. Tsou, C.-J. Hsu T. Ichikawa 1, T. Koga 1, D.
and Y.-C. Tsai, Natl. Chung Hsing Yamane 1, S. Iida 2, N. Ishihara 1,
Univ., Taiwan
H. Ito 1, T.-F.M. Chang 1, M. Sone
1, K. Machida 1 and K. Masu 1, 1
Tokyo Inst. of Technol. and 2 NTTAT, Japan

12 / 15

MNC 2019, October 28-31, 2019, Hiroshima, Japan
31A-9-4

31B-9-4

31C-9-4

14:00
Investigation of The Remaining
Mystery on in-Plane Randomnessof the Morpho-Blue Using FDTD
Simulations; toward Easier NanoFabrication Design

14:20
Thermal Effect in Chemically
Amplified Resist Film Exposed toElectron Beam

14:10
Capacitance Extraction Method ofa Free-Standing Bilayer Lipid
Membrane Formed over an
Aperture in a NanofabricatedSilicon Chip

K. Yamashita 1, M. Fukihara 1, Y.
Hirai 2, Y. Kuwahara 1,3 and A.
Saito 1, 1 Osaka Univ., 2 Osaka
Pref. Univ. and 3 RIKEN, JapanY. Ikari 1, K. Okamoto 1, N. Maeda Y. Tomioka 1, S. Takashima 1, M.
1, A. Konda 1, T. Kozawa 1 and T. Moriya 1, H. Shimada 1,F. Hirose
2, A. Hirano-Iwata 3 and Y.
Tamura 2, 1 Osaka Univ. and 2
Mizugaki 1, 1 Univ. of ElectroNuFlare Technol., Japan
Communications, 2 Yamagata
Univ. and 3 Tohoku Univ., Japan

31A-9-5
14:20
Effect of Microstructural Surface
Inspired by Biomimeticson Biofilm
Growth Suppression
M. Miyazaki 1and A. Miyauchi 2, 1
Hitachi and 2 Tokyo Medical and
Dental Univ., Japan
Author's Interview: 14:40-14:50

Author's Interview: 14:40-14:50

Author's Interview: 14:30-14:40

Author's Interview: 14:00-14:10

Room P2 (Dahlia, B2F)

31P-9: Poster Session IV, Group 2 (13:00-15:00, Oct. 31)
Chair: K. Yanagi (Tokyo Metropolitan Univ.)

Nanocarbons

31P-9-1

31P-9-2

31P-9-3

Effects of Catalyst Thickness on
the Growth of a Spin-Capable
Carbon Nanotube

Electron Transport in Chemically
Modified Single-Walled Carbon
Nanotube

Field Emission Properties ofGeometric and Electronic
Graphene Thin Films
Structures of Three-Dimensional
Covalent Organic Frameworks:
Polymerized Triptycene and Acene

31P-9-4

3D Printed Piezoresistive Polymer
Composites Strain Sensor

31P-9-5

Y.I. Choi 1, B. Dousti 1, J.Y. Lee
2,3, J.K. Kim 2,3, H.K. An 3, G.S.
Lee 1 and D. Jung 3, 1 Univ. of
Texas, USA, 2 Kyungpook Natl.
Univ. and 3 KITECH, Korea

R. Shima 1,2, A. Hida 2 and K.
Ishibashi 2, 1 Tokyo Univ. of Sci.
and 2 RIKEN, JapanY. Fujii, M. Maruyama and S.
Okada, Univ. of Tsukuba, Japan

Y. Gao and S. Okada, Univ. of
Tsukuba, Japan

Y.-Y. Chen 1, C.-C. Huang 2 and Y.C. Tsai 1, 1 Natl. Chung Hsing Univ.
and 2 Natl. Central Univ., Taiwan

31P-9-50L

31P-9-51L

31P-9-6

31P-9-7

31P-9-49L

Insulating Properties of Few-Layerh-BN Film Synthesized by
Chemical Vapor Deposition andSputtering Methods

Comparison between Mono- andMulti-Layer CVD-Grown Graphene
Transparent Electrodes forElectrochemiluminescence
Applications
N. Hara, T. Watanabe, T. Iwasaki,
S. Kosuga and S. Koh, Aoyama
Gakuin Univ., Japan

Structure and Electrical Properties Synthesis of MM-Sized TwoBenzene Detection Usingof Graphene Nanoribbons Studied Dimensional MoS2 Layers by Two- Metalloporphyrin-Modified Graphene
by in Situ Transmission Electron
FETs
Step Chemical Vapor Deposition
Microscopy

31P-9-9

31P-9-10

31P-9-11

31P-9-12

Preliminary Study on Position
Dependence of 3D Bottleneck
Barrier Height Minimum for Vth
Fluctuation Caused by Ion
Implantation to Source and Drain
Extensions of SOI Tri-Gate
FinFETs
T. Tsutsumi, Meiji Univ., Japan

Impacts of Limited EUV
Lithography Fidelity on Vertical
Nanowire Transistor Electrical
Characteristics

Chloride Doping on MoS2 FieldEffect Transistor by 1,2
Dichloroethane

X.-Y. Zheng, J.-S. Cai, C.-L. Lee,
S.-W. Chien and K.-Y. Tsai, Natl.
Taiwan Univ., Taiwan

T. Kim and E.K. Kim, Hanyang
Univ., Korea

D. Kondo 1,2 K. Hayashi 1,2, M.
Kataoka 1 and S. Sato 1,2, 1
Fujitsu Labs. and 2 Fujitsu, Japan

M. Tezura and T. Kizuka, Univ. of
Tsukuba, Japan

Chair: F. Ishikawa (Ehime Univ.)

Nanodevices

31P-9-8

Electrical Characteristics of Double TCAD Comparison of Planar andBack Gate Z2-FET on Sub 10nm
Recessed Gate Reconfigurable
FETs
SOI

S. Kwon 1,2, F. Gamiz 3, C.
Navarro 3, P. Galy 4, S.
Cristoloveanu 5, J. Ahn 2 and Y.T.
Kim 1, 1 KIST, 2 Hanyang Univ.,
Korea, 3 Univ. of Granada, Spain,
4 STMicroelectronics and 5
MINATEC, France

A. Ando 1, M. Okada 1, T. Kubo 1, T. Ikuta 1, H. Masai 2, T. Tamaki 2
S. Yamamoto 2, T. Irisawa 1, 1
and K. Maehashi 1, 1 Tokyo Univ. of
AIST and 2 Ryukoku Univ., Japan Agriculture and Technol. and 2 Univ.
of Tokyo, Japan

Y.T. Kim 1, C. Navarro 2, Y.M.
Jhon 1, Y.T. Byun 1 and F. Gamiz
2, 1 KIST, Korea and 2 Univ. ofGranada, Spain

31P-9-13

31P-9-14

Investigation of Electrical
Characteristics on P-Type SnO
TFTs with Ni Source/Drai

Negative Differential Resistance in Study for Implementation of
CaF2/Si Double Barrier Resonant Coulomb Blockade Transport on
Device Simulators
Tunneling Diodes via Plasma
Etching Mesa Isolation process

31P-9-15

S. Iizuka, H. Asai, J. Hattori, K.
C.-H. Wu 1, K.-M. Chang 2, Y.-X. Y. Kumagai, S. Fukuyama, H.
Tonegawa, K. Mikami, K. Hirose, Fukuda and T. Mori, AIST, Japan
Zhang 2, N. Xu 3, Y.-M. Chen 2
K. Tomizawa, K. Ichikawa and M.
and J.-R. Lin 1, 1 Chung Hua
Univ., 2 Natl. Chiao Tung Univ. and Watanabe, Tokyo Inst. of Technol.,Japan
3 Natl. Central Univ., Taiwan
Chair: T. Shimizu (Kansai Univ.)

Nanofabrication

31P-9-16

31P-9-17

31P-9-18

31P-9-19

31P-9-20

Fabrication and Evaluation of
Stacked Polymer Actuator Using
Electrospinning Method andFabrication of Actuator Bending in
Different Direction
K. Miyakawa, Y. Takahama, K.
Kida, K. Sato and M. Kushida,
Chiba Univ., Japan

Formation of Coaggregates ofAzobenzene Derivativeand
Quantum Dot

Fabrication of Ag Substrate
Immobilized Ag Nano-Particles forHigh Sensitivity Raman Scattering
Spectroscopy

Effect of Concertation of The
Etching Solution on Formation of
Si-TSVs Using Metal-Assisted
Chemical Etching

Effect of Pulse Width andTemperature on Resistance Change
Behavior of Ti/HfO2/Au ReRAM
DeviceS. Yamamoto, M. Yamauchi and S. K. Tokiyasu, H. Suzuki and H.
Masuo, Kwansei Gakuin Univ.,
Sakaue, Hiroshima Univ., JapanJapan

13 / 15

T. Yorioka, S. Hanatani, T. Ito, S. M. Morimoto, R. Hatanaka, T.
Shingubara and T. Shimizu, Kansai Shimizu, T. Ito and S. Shingubara,
Univ., Japan
Kansai Univ., JapanMNC 2019, October 28-31, 2019, Hiroshima, Japan
31P-9-21

31P-9-22 Withdrawn

31P-9-23

The Electric Property of Silver
Selenite Nanowires Network for
Reservoir Computing Device

Usefulness of Large-Sized Gold
Nanoprisms As a Photothermal
Therapy Agent

Neuronal Pulse Behavior Using
Change in Plasmonic Properties by Enhancement Control of TripletSingle-Walled Carbon
Hybridizing Au Nanoparticles with Triplet Annihilation-BasedElectron Donating Ligand
Upconverted Emission by Precisely Nanotube/[SV2W10O40]H4TPPAdjusting Localized Surface
Porphyrin Complex Random
Plasmon Wavelengths
Network

T. Kotooka 1, S. Lilak 2, A.Z. Stieg K. Kanakubo, K. Sugawa and J.
2, H. Tanaka 1, J.K. Gimzewski 2, Otsuki, Nihon Univ., Japan
1 Kyushu Inst. of Technol., Japanand 2 UCLA, USA

31P-9-26

31P-9-52L

Stable Analog Resistance Change
Mg2+-Doped BiFeO3
over a Wide Range Achieved by a
Nanocrystalline Powder
Molecular-Gap Atomic Switch
Synthesized by a Precipitation
Method: Preparation,
Characterizations, and Its Colossal
A. Kassai and T. Hasegawa,
P. Kum-onsa 1, N. Chanlek 2, P.
Waseda Univ., Japan
Thongbai 1 and P.
Srepusharawoot 1, 1 Khon Kaen
Univ., 2 Synchrotron Light Res.
Inst., Thailand

31P-9-24

T. Fukasawa, K. Sugawa and J.
Otsuki, Nihon Univ., Japan

S. Watanabe, K. Sugawa, and J.
Otsuki, Nihon Univ., Japan

31P-9-25

B. Deep 1, T. Ishizuka 2, T. Kojima
2, D. Goldianto 1, T. Ogawa 3 andH. Tanaka 1, 1 Kyushu Inst. ofTechnol., 2 Univ. of Tsukuba and 3
Osaka Univ., Japan

31P-9-53L

31P-9-54L

31P-9-55L

Synthesis, Characterization, andDielectric Relaxations of BiFeO3

Growth of Hetero-epitaxial Al on
Ge(111) and Segregation of Ge
Crystal by Annealing

Elationship between Vacancies and
The Magnetism in Pure Zinc Oxide
Nanoparticles

3+

Nanopowders Co-Doped by (La ,Mg2+) Ions
P. Kum-onsa 1, N. Chanlek 2, M.
Takesada 3, P. Srepusharawoot 1
and P. Thongbai 1, 1 Khon Kaen
Univ., 2 Synchrotron Light Res.
Inst., Thailand and 3 Hokkaido
Univ., Japan

H. Kato, K. Oshio, T. Touyama andM. Kobayashi 1, A. Ohta 1, M.
Kurosawa 1, M. Araidai 1, M. Ikeda K. Takase, Nihon Univ., Japan
1, N. Taoka 1, T. Shimizu 2, K.
Makihara 1 and S. Miyazaki 1, 1
Nagoya Univ. and 2 Kansai Univ.,
Japan

Chair: T. Tsuchiya (NIMS)

Inorganic Nanomaterials

31P-9-27

31P-9-28

31P-9-29

31P-9-30

31P-9-31

Exploring The Size Effect ofNanoscaled Manganese Cobaltite
Spinels

Evaluation of Thermoelectric
Properties of HeteroInterconnected Films between
Bi2Te3 Nanoplates and Bi2Se3
Electrodeposited Layers
X. Li, R. Mori and M. Takashiri,
Tokai Univ., Japan

N-doped ZnO Visible Light
Photocatalyst for Degradation of
Methylene Blue

Experimental and Theoretical
Analyses of Luminescent
Properties of Cerium Phosphate

Phase Transfer Protocol for Au-Pt
Alloy Nanoparticles Fabricated by
Laser Induced Nucleation

31P-9-32

31P-9-33

31P-9-34

First-Principles Simulation of
Thermoelectric Properties of BCC
High-Entropy Alloy Nanostructures
K. Nakamura, Kyoto Univ. of
Advanced Sci., JapanCVD Synthesis of Pentagonal and Leak Sensor for ColorimetricDiamond Shaped h-BN Crystals
Detection of Hydrogen Sulfide

Fabrication of Rb3Sb2Br9 Perovskite
Quantum Dots

K.P. Sharma, Y. Niimi, A.K.
Sharma, T. Maruyama, Meijo
Univ., Japan

L. Ali, Y.J. Lee and C.C. Byeon,
Kungpook Natl. Univ., Korea

W.-C. Zou, C.-L. Pan, C.-R. Lin,
Natl. Pingtung Univ., Taiwan

D. Kwon and J. Kim, Gachon Univ., S.-Y. Hsu, S.-M. Hung, Y.-K. Hsu,
Korea
Y.-H. Chiu and J.-S. Lee, Natl.
Pingtung Univ., Taiwan

31P-9-35

Physical Property of OrganicTerminated Germanane
Dispersions by Liquid Exfoliation
J. Lee 1,2, J.K. Kim 1,2, H.K. An 2, H. Tachibana, N. Takada and R.
Azumi, AIST, Japan
S.H. Kong 1 and D. Jung 2, 1
Kyungpook Natl. Univ. and 2
KITECH, Korea

31P-9-37

31P-9-38

Investigation of CsPbBr3
Perovskite Nanocrystal
Photodegradation Process Using
AFM and a Single-Particle
Spectroscopy

Oxygen-Tolerant Operation of Solid Hydrophobic Fluoropolymer
State Ionic Devices: Advantage of Interlayer between In2O3
All-Solid-State Structure in IonicSemiconductor and SiO2 Gate
GatingInsulator for Improvement of ThinFilm Transistor Performance

31P-9-56L

Fe3+/Nb5+ Co-Doped Rutile-TiO2
Nanocrystalline Powders Preparedby a Combustion Process:Preparation, Characterization and
Their Giant Dielectric Response

Y.A. Darmawan, M. Yamauchi and D. Nishioka 1,2, T. Tsuchiya 1,2, T. K. Sasaki, K. Nakamura, Y.
S. Masuo, Kwansei Gakuin Univ., Higuchi 2 and K. Terabe 1, 1 NIMS Shibata and S. Aikawa, Kogakuin
Japanand 2 Tokyo Univ. of Sci., Japan
Univ., Japan

T. Nachaithong 1, P. Moontragoon
1,2,, N. Chanlek 3 and P. Thongbai
1, 1 Khon Kaen Univ., 2
Commission on Higher Educationand Univ. Aenue, Thailand

R. Kuroda, T. Nakamura, and M.
Nakagawa, Tohoku Univ., Japan

31P-9-36

31P-9-57L

Chair: S. Nagano (Nagoya Univ.)

Organic Nanomaterials

31P-9-39

31P-9-40

31P-9-41

31P-9-42

31P-9-43

Photoinitiated Mass Transfer
Propagated from a Topmost
Photoresponsive Skin Layer

Emission Behavior of Ternary
Semiconductor Quantum Dots
Evaluated by a Single Particle
Spectroscopy

Low-Voltage Operation of
Diarylethene-PhotochromicChannel Transistors

Intra-Layer Mesogen Alignmentand Long-Range Order of Hetero
Smectic Lamellar Structures
Incorporating Smectic E Phase

Equilibrium Studies of The
Adsorption of Zinci on
Ontonanobiomaterials

Y. Kurokawa 1,2, R. Hayakawa 1,
S. Shimada 3, K. Higashiguchi 3,
H.D. Ngo 1, T.D. Dao 1, T. Nagao
1, Y. Noguchi 2, K. Matsuda 3, Y.
Wakayama 1, 1 NIMS, 2 Meiji
Univ. and 3 Kyoto Univ., Japan

A. Seta, M. Hara, S. Nagano and
T. Seki, Nagoya Univ., Japan

H.-H. Chou 1, S.-K. Ning 2, Y.-C.
Lee 1and H.-C. Yang 1, 1 Kun Shan
Univ. and 2 Natl. Univ. ofKaohsiung, Taiwan

I. Kitamura 1, R.B. Berk 2, M. Hara K. Takemura, W. Iwamoto, M.
Yamauchi and S. Masuo, Kwansei
1, S. Nagano 2 and T. Seki 1, 1
Nagoya Univ., Japan and 2 Tech. Gakuin Univ., Japan
Univ. of Munich, Germany

Chair: R. Kometani (Univ. of Tokyo)

NanoTool

31P-9-44

31P-9-45

31P-9-46

Anisotropic Pyrochemical Etchingof Polytetrafluoroethylene by Soft
X-Ray

Near-Infrared Light Absorbers
Evaluation of ThermoelectricIon Scattering Spectroscopy of α- Effect of The Numbers of Beams
Using Si-Deposited Gold Nanowire Properties of VLS-Grown Bridged Si
Ga2O3 Grown on r-Plane Sapphire and Corners on Resonant
Grating Structures
Nanowireby Mist Chemical Vapor Deposition Frequency Response of Silicon
Microresonator to Near-InfraredLight Irradiation for Optical Sensing

31P-9-47

31P-9-48

K. Fujitani, M. Takeuchi, A.
O. Kubo 1, D. Tamba 1, S. Osaka K. Takegami, N. Arai, A. Uesugi, K. K. Takegami, N. Arai, A. Uesugi, K. A. Uesugi, R. Kitagawa, R. Oguni, K.
Yamaguchi and Y. Utsumi, Univ. of 1, M. Oda 2,3, H. Tabata 1 and M. Sugano and Y. Isono, Kobe Univ., Sugano and Y. Isono, Kobe Univ., Sugano and Y. Isono, Kobe Univ.,
Japan
Japan
Japan
Hyogo, Japan
Katayama 1, 1 Osaka Univ., 2
Kyoto Univ. and 3 FLOSFIA, Japan

31P-9-58L
Pinpoint Control of a Microtubule
Movement by Using Local Vertical
Electric Field
M. Nakamura 1 ,K. Hatazawa 1, R.
Kawamura 2 and T. Hoshino 1, 1
Hirosaki Univ. and 2 Saitama
Univ., Japan

14 / 15

MNC 2019, October 28-31, 2019, Hiroshima, Japan
Room P2 (Dahlia, B2F)
Coffee Break (14:10-15:10)
Room A (Cosmos 1, B2F)
31A-10: Nanocarbons Synthesis

Room B (Cosmos 2, B2F)
31B-10: Photolithography andPatterning

Room C (Ran 1, B2F)
31C-10: Nanodevices - NextGeneration Memory & FET

Room D (Ran 2, B2F)
31D-10: Nanofabrication IV

Chairs:H. Omachi (Nagoya Univ.)

Chairs:T. Harada (Univ. of Hyogo)

S. Okada (Univ. of Tsukuba)

Chairs:H. Tanaka (Kyushu Inst. ofTechnol.)
K. Takase (Nihon Univ.)

K. Asakawa (KIOXIA)

Chairs:Y. Ishikawa (Nara Inst. of Sci. andTechnol.)N. Ozaki (Wakayama Univ.)

31A-10-1

31B-10-1

31C-10-1

15:15
Synthesis of Polythiophene from
Diiodo-Bithiophene Molecules
Inside Carbon Nanotubes

15:15
15:15
Statistical Patterning – The Trillion In-Situ TEM Observation of CuFeature Challenge (Invited)
WOX CBRAM During Gradual
Resistance Decrease for The
M.J. Maslow, ASML, The
S. Muto, S. Sakai, A. TsurumakiNetherlands
Fukuchi, M. Arita dn Y. Takahashi,
Hokkaido Univ., Japan

15:15
Control of Peptide Self-Assembly

31D-10-2

H. Kageyama, H. Kishida, and T.
Koyama, Nagoya Univ., Japan

31D-10-1

M. Sakurai, P. Koley and M. Aono,
NIMS, Japan

31A-10-2

31B-10-2

31C-10-2

15:35
Growth of Monolayer Hexagonal
Boron Nitride Single-Crystals on
Exfoliated Graphite

15:45
Considerations of Missing Hole
Defects in EUV Patterning

H. Arai 1, T. Inoue 1, R. Xiang 1,
S. Chiashi 1 and S. Maruyama 1,
2, 1 Univ. of Tokyo and 2 AIST,Japan

H. Yaegashi 1, A. Hara 2 ,S.
Okada 2 and S. Shimura 2, 1
Tokyo Electron and 2 Tokyo
Electron Kyushu, Japan

15:35
15:35
Improving Retention in Nonvolatile Glass Microchannels Fabricated by
Charge-Trapping Memory Cell by Using Live Plant Root andArbuscular Mycorrhiza
Incorporating TFETTAHOAOS(TaN/Al2O3/HfO2/SiO2/A
l2O3/SiO2/Si) Structure
Y.S. Song 1, T. Jang 1, K.K. Min
S. Nakashima, K. Tokumaru and F.
1,2, M.-H. Baek 1, J. Yu 1 and B.- Tsumori, Kyushu Univ., Japan
G. Park 1, 1 Seoul Natl. Univ. and2 SK Hynix, Korea

31A-10-3

31B-10-3

31C-10-3

31D-10-3

15:55

16:05

15:55

15:55

Synthesis of Relatively Small
Diameter Inorganic Nanotubes by
Sulfurization of
Solutionsynthesized Nanowire
Precursors and Their Transistor
Y. Yamogida, Y. Miyata and K.
Yanagi, Tokyo Metropolitan Univ.,
Japan

Exploring Resist Options for Euv
Layers of Imec N5 CMOS Vehicle

Memristor in The Single Node
Echo State Machine:Signal
Processing and Neuromimetic
Behavior

Self-Align Fabrication of NanoReservoir with NV Center in
Diamond Surface for Nuclear
Magnetic Resonance of Small
Molecules
K. Kawakatsu 1, Y. Ishii 1, Y. Hata
1, Y. Saito 1, K. Nakamura 1, K.
Nagaoka 1, T. Sonoda 1, T.
Tatsuishi 1, T. Teraji 2, S. Onoda
3, T. Higuchi 3,4, K. Yamada 3, T.
Oshima 3, T. Shinada 5, H.
Kawarada 1, W. Kada 4, O.
Hanaizumi 4, J. Isoya 6 and T.
Tanii 1, 1 Waseda Univ., 2 NIMS, 3
Natl. Inst. for Quantum andRadiological Sci. and Techno., 4
Gunma Univ., 5 Tohoku Univ. and6 Univ. of Tsukuba, Japan

A. Thiam, S. Paolillo, F. Lazzarino, E. Wlaźlak, P. Zawal, M. Marzec
M. Ercken, P. Wong and A.
and K. Szaciłowski, AGH Univ. ofCharley, Imec, Belgium
Sci. and Technol., Poland

31A-10-4

31B-10-4

31C-10-4

16:15
Fabrication and Study of
PANI/ZnO/Graphene Composite
Ammonia Sensor

16:25
Development of High-Power EUV
Irradiation Tool in Hydrogen
Atmosphere

16:15
Atomistic Study of Sensing
Mechanisms of Molecular
Decorated FETs

A. Ohgata, T. Harada and T.
C.-Y. Ting 1, P.-L. Wu 1, C.-C.
Huang 1, C.-Y. Su 2 and Y.-C. Tsai Watanabe, Univ. of Hyogo, Japan1, 1 Natl. Chung Hsing Univ. and 2
Natl. Central Univ., Taiwan

T. Tanaka, T. Yajima and K.
Uchida, Univ. of Tokyo, Japan

31A-10-5

31C-10-5

16:35
Electrical Property of Graphene
Coated AFM Probes

16:35
Recovery of Plasma-Induced
Damage in Ge Fin Fabrication by
Thermal Annealing for High
Performance Ge pFinFETs
W. Mizubayashi 1, H. Oka 1, T.
Mori 1, Y. Ishikawa 1, S.
Samukawa 2 and K. Endo 1, 1
AIST and 2 Tohoku Univ., Japan

S. Sharma 1, R. Kizu 1, G. Kalita 1,
M. Tanemura 1, M. Umeno 2, 1
Nagoya Inst. of Technol. and 2 C's
Techno, Japan
Author's Interview: 16:55-17:05

Author's Interview: 16:45-16:55

Author's Interview: 16:55-17:05

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31D-10-4L
16:15
The Effect of Annealing Process on
Oxygen Vacancy in MgO-Based
Nonvolatile Resistive Switching
MemoryZ.-H. Wu 1,2, K.-Y. Chen 1,2, H.-Y.
Pan 1,2, C.-W. Lee 1,2, C.-C. Yang
2 and Y.-K. Su 1,2, 1 Natl. Cheng
Kung Univ. and 2 Kun Shan Univ.,
TaiwanAuthor's Interview: 16:35 16:45