Ⅱ-9. Instrumentation

RIKEN Accel. Prog. Rep. 51 (2018)

Beam preparation for industrial utilization of Ar, Kr, Xe,and Au beams
A. Yoshida∗1 and T. Kambara∗1∗1RIKEN Nishina Center㻵㻯㻞㻛㻌㻿㻿㻰㼟㻌㻱㼚㼑㼞㼓㼥㻌㻰㼑㼓㼞㼍㼐㼑㼞㻌㻲㼛㼕㼘㼟㻌㼂㼍㼏㼡㼡㼙㻌㼃㼕㼚㼐㼛㼣㻌㻿㼏㼍㼠㼠㼑㼞㼕㼚㼓㻌㻲㼛㼕㼘㻌㻔㻭㼡㻕㻌㻵㻯㻝㻌㻮㼑㼍㼙㻌㻌㻌㻟㻜㻌㼏㼙㻌㻌

Through the fee-based industrial utilization of RIBF
facilities, a space-use semiconductor company has beenusing Ar and Kr beams at the E5A beam line1) a few
times in a year. The client irradiates semiconductor devices in the air to test the radiation tolerance of single
event eﬀects (SEEs).
Figure 1 shows the conﬁguration for the irradiation. A
uniform beam-ﬂux distribution is achieved2) with wobbler magnets and a beam scattering foil placed 4.5 m
upstream of a vacuum separation window. Downstreamof the window, an air-ionization chamber (IC1) that consists of a stack of 24 µm-thick Al-Mylar foils is used as a
total beam intensity monitor for all beams. To monitor
beam intensity below 1 M cps, a thin plastic scintillator(PL) covered by a 48-µm-thick Al-Mylar foil is used. Anadjustable energy degrader follows to control the LET,
where the beam energy is adjusted by inserting up to ten
Al foils with thickness ranging from 5 to 975 µm. At thesample irradiation position, the range value of the beamis measured using a small air-ionization chamber (IC2),and the beam energy is measured with a replaceable Sidetector stack (SSDs) 2 mm in total thickness.
As a next step, the client plans to use heavier beams
with a higher linear energy transfer (LET) for the SEEtest. Therefore, we have studied the characteristics of136Xe and 197 Au beams in the air. In Table 1, the measurement results and the irradiation parameters for theXe and Au beams are summarized and compared withthose of Ar and Kr beams. Since the Xe and Au beams
are slow, we minimized the thickness of materials in thebeam line. The vacuum separation window was replacedwith a 25-µm thick Kapton foil. For the Xe beam, weused a 100-µm-thick PL scintillator, while for the Aubeam, we did not use a PL scintillator or a beam scattering foil. The air path lengths Lair1 and Lair2 indicatedin Fig. 1 were minimized as well.
We ﬁrst measured the range of the beams in Al at theexit of the energy degrader. On increasing the degrader
thickness, the IC2 current increased until the Bragg peakand dropped at the range of the ions. From this measured range of values, we obtained the maximum beamenergy on a sample placed in the air by referring to thethickness-energy relation from SRIM3) calculations. In
the same manner, the SSDs were energy-calibrated bychanging the degrader thickness.
From the measured energy spectra of SSDs, the LET
peak value and its 1σ width in a Si sample were calculated. The corresponding range of values of the beamin Si is listed. According to the client, a beam rangeof 50–100 µm is indispensable for the SEE test of usual
semiconductor devices. A high-LET condition near the㻿㼍㼙㼜㼘㼑㻌㼜㼛㼟㼕㼠㼕㼛㼚㻌㻌㻸㼍㼕㼞㻞㻌㻌㼄㻌㼅㻌㻮㼑㼍㼙㻌㼃㼛㼎㼎㼘㼑㼞㻌㻹㼍㼓㼚㼑㼠㼟㻌㻼㻸㻌㻌㻠㻚㻡㻌㼙㻌㻌㻌㻸㼍㼕㼞㻝㻌㻌

Fig. 1. Irradiation setup at the E5-A beam line.
Table 1. Summary of irradiation parameters.
㻮㼑㼍㼙㻌㻭㼏㼏㼑㼘㼑㼞㼍㼠㼛㼞㼟㻌㻱㻌㼕㼚㻌㼢㼍㼏㼡㼡㼙㻠㻜㻭㼞㻭㼂㻲㻗㻾㻾㻯㻤㻠㻷㼞㻭㼂㻲㻗㻾㻾㻯㻝㻟㻢㼄㼑㻾㻵㻸㻭㻯㻝㻗㻾㻾㻯㻝㻥㻣㻭㼡㻾㻵㻸㻭㻯㻝㻗㻾㻾㻯㻥㻡㻚㻜㻣㻜㻚㻜㻟㻥㻚㻜㻝㻤㻚㻠 㻭㻚㻹㼑㼂䃛㼙㻣㻡㻡㻜㻞㻜㻜㻌㼂㼍㼏㼡㼡㼙㻌㼒㼛㼕㼘㻦㻌㻷㼍㼜㼠㼛㼚㻣㻡㻣㻡㻞㻡㻞㻡䃛㼙㻌㻌㻌㻔㼐㼕㼍㼙㼑㼠㼑㼞㻕㻔䃅㻢㻕㻌㻔䃅㻢㻕㻌㻔䃅㻡㻕㻔䃅㻡㻕 㻔䃅㼏㼙㻕䃛㼙㻌㻼㻸㻌㼟㼏㼕㼚㼠㼕㼘㼍㼠㼛㼞㻡㻜㻜㻡㻜㻜㻝㻜㻜㻜㻌㻭㼕㼞㻌㼜㼍㼠㼔㻦㻌㻸㼍㼕㼞㻝㻝㻠㻚㻡㻝㻠㻚㻡㻝㻠㻚㻡㻝㻜㻚㻡 㼏㼙㼏㼙㻌㻌㻌㻌㻌㻌㻌㻌㻌㻌㻌㻌㻌㻸㼍㼕㼞㻞㻝㻢㻚㻜㻝㻢㻚㻜㻞㻚㻜㻞㻚㻜䃛㼙㻖 㻌㻱㼤㼜㻚㻾㼍㼚㼓㼑㻌㼕㼚㻌㻭㼘㻟㻞㻢㻜㻣㻝㻡㻝㻣㻡㻢㻜㻌㻌㻌㻌㻌㼣㼕㼠㼔㼛㼡㼠 㻌㼑㼚㼑㼞㼓㼥㻌㼐㼑㼓㼞㼍㼐㼑㼞㻌㻭㼘㻙㼒㼛㼕㼘㻧㻌㻌㼙㼍㼤㻚㻌㻱㻌㼛㼚㻌㼟㼍㼙㼜㼘㼑㻌㼟㼡㼞㼒㼍㼏㼑㻖 㻌㻌㻌㻱㻌㼛㼚㻌㼟㼍㼙㼜㼘㼑㻤㻝㻚㻝㻥㻠㻝㻚㻤㻞㻝㻣㻚㻟㻠㻠㻚㻢㻞 㻭㻚㻹㼑㼂㻖 㻌䃢㻱㻌㼛㼚㻌㼟㼍㼙㼜㼘㼑㻤㻚㻠㻝㻤㻚㻜㻟㻞㻚㻣㻠㻝㻚㻤 㻹㼑㼂㻌㻾㼍㼚㼓㼑㻌㻔䃢㻾㻕㻟㻡㻢㻣㻚㻜㻣㻞㻞㻚㻣㻝㻤㻜㻚㻞㻡㻢㻚㻢 䃛㼙㻌㻌㼕㼚㻌㼟㼍㼙㼜㼘㼑㻦㻌㻿㼕㻔㻝㻢㻚㻡㻕㻔㻢㻚㻟㻕㻔㻠㻚㻠㻕㻔㻝㻚㻣㻕㻌㼏㼛㼞㼞㼑㼟㼜㼛㼚㼐㼕㼚㼓㻞㻚㻞㻝㻝㻟㻚㻠㻤㻠㻣㻚㻝㻥㻥㻠㻚㻜㻥 㻹㼑㼂㻛㻌㻌㻸㻱㼀㻌㻔䃢㻸㻱㼀㻕㻌㼕㼚㻌㻿㼕㻔㻜㻚㻜㻟㻕㻔㻜㻚㻜㻣㻕㻔㻜㻚㻟㻞㻕㻔㻜㻚㻝㻝㻕 㻔㼙㼓㻛㼏㼙㻞㻕㻌㼙㼍㼤㼕㼙㼡㼙㻌㻸㻱㼀㻌㼕㼚㻌㻿㼕㻹㼑㼂㻛㻝㻤㻚㻣㻠㻝㻚㻜㻣㻜㻚㻜㻥㻡㻚㻜 㻔㼙㼓㻛㼏㼙㻞㻕㻌㻌㼍㼠㻌㻮㼞㼍㼓㼓㻌㼜㼑㼍㼗㻌㻌㻌㻌㻌㼣㼕㼠㼔 㻌㼑㼚㼑㼞㼓㼥㻌㼐㼑㼓㼞㼍㼐㼑㼞㻌㻭㼘㻙㼒㼛㼕㼘㻌㻧㻌㼚㼑㼍㼞㻌㼠㼛㻌㼠㼔㼑㻌㻮㼞㼍㼓㼓㻌㼜㼑㼍㼗㻌㻰㼑㼓㼞㼍㼐㼑㼞㻌㼒㼛㼕㼘㻦㻌㻭㼘㻟㻝㻞㻠㻚㻤㻡㻤㻢㻚㻤㻝㻝㻟㻚㻢㻝㻡㻚㻣 䃛㼙㻖 㻌㻌㻌㻱㻌㼛㼚㻌㼟㼍㼙㼜㼘㼑㻢㻚㻣㻤㻡㻚㻥㻜㻢㻚㻜㻝㻞㻚㻡㻜 㻭㻚㻹㼑㼂㻖 㻌䃢㻱㻌㼛㼚㻌㼟㼍㼙㼜㼘㼑㻠㻤㻚㻞㻠㻥㻚㻤㻡㻞㻚㻞㻞㻞㻚㻢 㻹㼑㼂㻌㻾㼍㼚㼓㼑㻌㻔䃢㻾㻕㻣㻣㻚㻤㻡㻥㻚㻢㻢㻝㻚㻥㻟㻣㻚㻡䃛㼙㻌㻌㼕㼚㻌㼟㼍㼙㼜㼘㼑㻦㻌㻿㼕㻔㻝㻠㻚㻢㻕㻔㻢㻚㻟㻕㻔㻟㻚㻠㻕㻔㻝㻚㻞㻕㻌㼏㼛㼞㼞㼑㼟㼜㼛㼚㼐㼕㼚㼓㻝㻝㻚㻢㻥㻟㻣㻚㻝㻜㻢㻢㻚㻡㻜㻥㻝㻚㻟㻡 㻹㼑㼂㻛㻌㻌㻸㻱㼀㻌㻔䃢㻸㻱㼀㻕㻌㼕㼚㻌㻿㼕㻔㻜㻚㻥㻟㻕㻔㻜㻚㻥㻢㻕㻔㻜㻚㻢㻣㻕㻔㻜㻚㻣㻜㻕 㻔㼙㼓㻛㼏㼙㻞㻕㻌㻿㼏㼍㼠㼠㼑㼞㼕㼚㼓㻌㼒㼛㼕㼘㻌㻦㻌㻭㼡㻖㻕㻌㼙㼑㼍㼟㼡㼞㼑㼐㻌㼢㼍㼘㼡㼑

Bragg peak was also measured by controlling the thickness of the degrader.
From this result, the 136 Xe beam is available for
the SEE test with a LET value ranging from 47 to67 MeV/(mg/cm2 ). On the other hand, the maximum
energy of the 197 Au beam in the air corresponds to its
maximum LET at the Bragg peak. More detailed information on the E5A beam line is provided in our homepage.4)
References
1) T. Kambara, RIKEN Accel. Prog. Rep. 48, 239 (2015).
2) T. Kambara, RIKEN Accel. Prog. Rep. 49, 193 (2016).
3) J. F. Zeigler, http://www.srim.org/
4) http://ribf.riken.jp/sisetu-kyoyo/equipments/e5a.
html.

- 185 -