MNC 2018, November 13-16, 2018, Sapporo Park Hotel, Sapporo, Japan

Tuesday, November 13
Room C (The Terrace Room (1F))
13:00-16:45 Technical Seminar ’’EUV Lithography Tutorial’’ in JapanesePark Hall (3F)
17:20-19:20 Welcome Reception

Wednesday, November 14
Room P1 (Emelald, 3F)
14P-1: Plenary Session I

Chairs: Y. Ono (Shizuoaka Univ.) and K. Nishiguchi (NTT)

14P-1-0 9:30-10:00
Opening Remarks: S. Kasai (Hokkaido Univ.), Award Presentation: Y. Ono (Shizuoka Univ.) and S. Kasai (Hokkaido Univ.)
Local Announcement from Committee: T. Kozawa (Osaka Univ.)
14P-1-1 9:50
AI Based Self-Driving Vehicles and Its Relation with Nano Electronics (Plenary)T. Nobe, Intel and Ngoya Univ., Japan

Coffee Break
14P-1-2 10:50
EUV Lithography at Threshold of High-Volume Manufacturing and Beyond (Plenary)
A. Yen, ASML, USA

14P-1-3 11:30
Materials innovation and integration for new computing paradigms (Plenary)
K. Moselund, IBM Research Zurich, Switzealnd

Lunch
Room A (Park Plaza D (B2F)
14A-2: Symp. A: Nano-Metrology
for Exploring the Limit I

Room B (Park Plaza A (B2F)
14B-2: Microsystem
Technology and MEMS I

Room C (The Terrace Room (1F))
14C-2: Nano-Tool

Room D (Emina (1F))
14D-2: Inorganic
Nanomaterials I

Chairs:T. Sato (Toshiba Memory)
T. Azuma (EIDEC)

Chairs:R. Takigawa (Kyushu Univ.)
Y. Hasegawa (Hiroshima City Univ.)

Chairs:R. Kometani (Univ. of Tokyo)
T. Hoshino (Hirosaki Univ.)

Chairs:T. Tsuchiya (NIMS)
M. Suzuki (AIST)

14A-2-1
13:30
Thin Films and Nanoparticles
Made from The Self-Assembly of
Carbohydrates Block Copolymers(Invited)

14B-2-1
13:30
HighlySensitive
Spintronic
Strain-Gauge Sensor and SpinMEMS Microphone (Invited)

14C-2-1
13:30
Application
Microscopy
Electronics(Invited)

14D-2-1
13:30
Low-Temperature Formation of
GeSn
Nanodots
byTin
Mediation

R. Borsali, Univ. of Grenoble Alpes,
France14A-2-2
14:00
CD SEM Metrology for the 5nm
Technology Node and Beyond(Invited)
G.F. Lorusso 1, N. Horiguchi 1, J.
Bömmels 1, C.J. Wilson 1, G. Van denbosch 1, G.S. Kar 1, T. Ohashi 2, T.
Sutani 3, R. Watanabe 3, Y. Takemasa
3, M. Ikota 3, 1 imec, Belgium, 2Hitachi and 3 Hitachi HighTechnologies, Japan

14A-2-3
14:30
Advanced CD-SEM Metrology for
Novel Patterning Technologies(Invited)
T. Kato, Hitachi High-Technologies,
Japan

Y. Fuji, Y. Higashi, S. Kaji, K.
Masunishi, A. Yuzawa, T. Nagata, K.
Okamoto, S. Baba, T. Ono and M.
Hara, Toshiba, Japan

14B-2-2
14:00
A Study of Membrane Patterning
and Sacrificial-Layer Removal
Process for SiGe MEMS
Enabling High-Sensitivity and
Low-Power Inertial Sensors
H. Tomizawa, T. Saito, A. Fujimoto, Y.
Kurui and A. Kojima, Toshiba, Japan

14B-2-3
14:20
Long-Term Mechanical Reliabilityof SiGe Film for MEMS
Y. Matsuo 1, A. Uesugi 2, A. Fujimoto
3, T. Saito 3, H. Tomizawa 3 and T.
Namazu 1, 1 Aichi Inst. of Technol., 2
Kobe Univ. and 3 Toshiba, Japanof
HeliumIon(HIM) to Nanoandbio-science

S. Ogawa, AIST, Japan

14C-2-2
14:00
Damage-Free Nano Sampling
Technique for Carbon Nanotube
Characterization
K. Beppu 1, A. Fukui 1, A. Takakura 2,
T. Nishihara 2, Y. Miyauchi 3, K. Itami 2
and T. Namazu 1, 1 Aichi Inst. ofTechnol., 2 Nagoya Univ. and 3 Kyoto
Univ., Japan

14C-2-3
14:20
Temporal-Stop of Microtubule
MovementbyElectrical
Stimulation on Virtual CathodeK. Hatazawa 1, H. Miyazako 2, R.
Kawamura 3 and T. Hoshino 1,2, 1
Univ. of Hirosaki, 2 Univ. of Tokyo and 3
Saitama Univ., Japan

14C-2-4
14:40
Removal of Surface Adsorbed
Kinesin by Multi-Photon Laser
Ablation and Reloading toward
Arbitral Patterning of Microtubule
Driving Track

K. Meguriya, S. Kikuchi, N. Kobayashi,
H.Y. Yoshikawa, S. Nakabayashi and R.
Kawamura, Saitama Univ., Japan

14C-2-5
15:00
Development of OptomechanicalNanoresonators
Elastically
Coupled in Series for Q Factor
Independent
Wavelength
Measurement
K. Tanaka, S. Warisawa and R.
Kometani, Univ. of Tokyo, Japan-1-

H. Okamoto 1, K. Takita 1, K.
Tsushima 1, T. Tawara 2, K. Tateno 2,
G. Zhang 2, and H. Gotoh 2, 1
Hirosaki Univ. and 2 NTT, Japan

14D-2-2
13:50
Excited Spin Engineering of
In0.5Ga0.5As Quantum Dots by an
Adjacent
Two-Dimensional
In0.1Ga0.9As Quantum Well
Potential

S. Hiura 1, K. Takeishi 1, J. Takayama
1, T. Kiba 2 and A. Murayama 1, 1
Hokkaido Univ. and 2 Kitami Inst. ofTechnol., Japan

14D-2-3
14:10
Broadband Anti-Reflection EffectBased on Oblique Angle
Deposition for InGaAsP/InGaAs
Double Junction Solar Cells
G. Oh, C.W. Ahn and E.K. Kim,
Hanyang Univ., Korea

14D-2-4
14:30
Solution-Processed All-Inorganic
Silicon Nanocrystal Thin Film forElectronic Device Application
S. Kano and M. Fujii, Kobe Univ.,Japan

MNC 2018, November 13-16, 2018, Sapporo Park Hotel, Sapporo, Japan
14C-2-6
15:20
Development of 3D Formed Tactile
Sensor by High Temperature
Punch Creep Forming Technique
K. Nimura, K. Osaka, T. Toyoda, A.
Uesugi, K. Sugano and Y. Isono, Kobe
Univ., Japan

Author's Interview: none

Author's Interview: 16:35-16:45

Author's Interview: 15:40-15:50

Author's Interview: 16:45-16:55

Room P2 (Park Plaza BC (B2F)
Coffee BreakRoom A (Park Plaza D (B2F)
14A-3: Symp. A: NanoMetrology for Exploring theLimit II

Room B (Park Plaza A (B2F)
14B-3: Microsystem
Technology and MEMS II

Room C (The Terrace Room (1F))
14C-3: Nanodevices I

Room D (Emina (1F))
14D-3: Inorganic
Nanomaterials II

Chairs:T. Sato (Toshiba Memory)
T. Azuma (EIDEC)

Chairs:Y. Tomizawa (Toshiba)
D. Yamane (Tokyo Inst. of Technol.)

Chairs:Y. Ishikawa (NAIST)

Chairs:T. Tsuchiya (NIMS)
M. Suzuki (AIST)

14A-3-1
15:15
X-Ray
Based
Dimensional
Metrology for The Semiconductor
Industry (Invited)

14B-3-1
14:55
Geometrical Compensation forMode-Matching of (100) Silicon
Ring Resonator for Vibratory
Gyroscope

14C-3-1
16:05
Control of Heat and Charge
Transport in Carbon-NanotubeBased Thermoelectric Materials
Using Bionanoparticles (Invited)

14D-3-1
15:05
Amorphous Transitional Metal
Oxide
Photocatalysts
forHydrogen Evolution

Y. Shu, Y. Hirai, T. Tsuchiya and O.
Tabata, Kyoto Univ., Japan

M. Nakamura, NAIST, Japan

14A-3-2
15:45
X-Ray
Nanoscopic
Phase
Imagingwith
Grating
Interferometry (Invited)

14B-3-2
15:15
2D Fe-Based Metallic Glass
Micromirror
DrivenbyElectromagnetic Actuator

14C-3-2
16:35
Anomalous Phonon Diffusion in
Isotopically Disordered ArmchairEdge Graphene Nanoribbons

A. Momose Tohoku University, Japan

C.-H. Ou 1, Y.-C. Lin 2, Y. Keikoin 3, T.
Ono 2, M. Esashi 2 and Y.-C. Tsai 1, 1
Natl. Chung Hsing Univ., Taiwan, 2
Tohoku Univ. and 3 MEMS-CORE,
Japan

N. Mori, T. Kamioka and G. Mil'nikov,
Osaka Univ., Japan

14B-3-3
15:35
5 MHz p-n Diode Longitudinal
Extensional Mode Resonatorwith High Efficiency

14C-3-3
16:55
External Electric Field Induced
Metal Insulator Transition in VO2Thin Films for Critical Thermal
Switching Device

D.F. Sunday and J. Kline, NIST, USA

14A-3-3
16:15
Development of EUV Phase
Imaging Microscope for Mask-3DEffect and Defect Evaluation(Invited)
T. Harada, Univ. of Hyogo, JapanK. Umeda, F. Miyazaki, H. Tanigawa,T. Furutsuka and K. Suzuki,
Ritsumeikan Univ., Japan

14B-3-4
15:55
A
Flexible
Nanogenerator
Petal Surface

Triboelectricwith Artificial

S. Jessadaluk 1,2, N. Khemasiri 1,2, P.
Rattanawarinchai 1, S. Rahong 1,2, A.
Rangkasikorn 1,2, N. Kayunkid 1,2, S.
Wirunchit 1,2, A. Klamchuen 3 and J.
Nukeaw 1,2, 1 King Mongkut Inst. ofTechnol. Ladkrabang, 2 Ministry of
Education and 3 NANOTEC, Thailand

G.-R. Chen, Y.-F. Huang, Y.-Y. Chen,
C.-Y. Wu and Y.-C. Tsai, Natl. Chung
Hsing Univ., Taiwan

Author's Interview: 17:15-17:25

Happy Hour-2-

14D-3-3
15:45
Fabrication of Micro-Heater
Integrated Pt Decorated ZnONanorods for MEMS Compatible
High Performance Miniaturized
Methane Gas Sensor
V.V. Kondalkar, U.-H. Lim, Y.B. Lee
and K. Lee, Ajou Univ., Korea

14D-3-4
16:05
Enhancement on Densification
and Crystallization of Conducting
La0.7Sr0.3VO3 Perovskite Anode
Derived from Hydrothermal
Process

V.V. Luchinin 1, S.I. Goloudina 1, V.M.
Pasyuta 1, D.A. Kirilenko 2,3, A.N.
Smirnov 2, G.A.Konoplev 1, V.V.
Andrushkin 1, V.P. Sklizkova 4, I.V.
Gofman 4, V.M. Svetlichnyi 4, V.V.
Kudryavtsev 4, 1 St. Petersburg
State Electrotechnical Univ., 2 Ioffe
Inst., 3 ITMO Uni. and 3 Inst. ofMacromolecular Compounds, RAS,
RussiaRoom A (Park Plaza D (B2F) and Room P2 (Park Plaza BC (B2F))
17:35-19:00

S.-Y. Tsa 1, K.-Z. Fung 1 and H.-C.
Yang 2, 1 Natl. Cheng Kung Univ. and2 Kun Shan Univ., Taiwan

14D-3-5
16:25
Formation of Graphene-LikeFilms on Quartz and Si
Substrates by Carbonization of
Rigid-Chain
PolyimideLangmuir-Blodgett Films

Y. Mitsunari 1, S. Watanabe 1, Y.
Hasegawa 1, M. Matsushima 2, T.
Kawabe 2 and M. Shikida 1, 1
Hiroshima City Univ. and 2 Nagoya
Univ., Japan

Author's Interview: 16:35-16:45

14D-3-2
15:25
Investigation of Conducting NiCo Spinel Oxide Thin Film for
Photoelectrochemical
Cell
Applications

C.-Y. Liu, S.-Y. Tsai, C.-T. Ni, K.-Z.
Fung and C.-Y. Cho, Natl. Cheng
Kung Univ., Taiwan

14B-3-5
16:15
Development of Three Layered
Tube Type Flow Sensor For
Human
Respiration
Measurement

Author's Interview: none

Z.Y. Lin, C. Du, B. Yan and G.W.
Yang, Sun Yat-sen Univ., China

Author's Interview: 16:45-16:55

MNC 2018, November 13-16, 2018, Sapporo Park Hotel, Sapporo, Japan

Thursday, November 15
Room A (Park Plaza D (B2F)
15A-4: Resist and Directed
Self-Assembly

Room B (Park Plaza A (B2F)
15B-4: Nanocarbons I

Room C (The Terrace Room (1F))
15C-4: Nanodevices II

Room D (Emina (1F))
15D-4: Microsystem
Technology and MEMS III

Chairs:T. Azuma (EIDEC)
T. Nagai (JSR)

Chairs:S. Okada (Univ. of Tsukuba)
K. Yanagi (Tokyo Metropolitan Univ.)

Chairs:M. Seki （Univ. of Tokyo)
Y. Ishikawa（NAIST)

Chairs:Y. Tomizawa (Toshiba)
T. Nakakubo (Canon)

15A-4-1
9:00
Defect Reduction Strategies for
Directed Self-Assembly Process(Invited)

15B-4-1
9:00
Energetics
andSpin-State
Tuning of Triangular h-BN
Nanoflakes by an Electric Field

15C-4-1
9:00
Study on Electrical Discriminationof 2D Random Nanostructures
Embedded in a Si MOSFET

15D-4-1
9:00
Surface Activated Bonding of
LiNbO3 and Si for Optical
Microsystem (Invited)

H.S. Suh 1, P.R. Delgadillo 1, D. Bae
1,2, J. Li 1, N. Vandenbroeck 1, G.
Mannaert 1, A. Nair 1 and T.-G. Kim 1,
1 imec, Belgium and 2 KAIST, Korea

M. Maruyama and S. Okada, Univ. of
Tsukuba, Japan

K. Shimizu 1, Y. Ueba 2, M. Kitamura 2,
Y. Ohyagi 2, M. Hoga 3, N. Tate 4, M.
Naruse 5, T. Matsumoto 6 and S. Kasai
1, 1 Hokkaido Univ., 2 Dai Nipporn
Printing, 3 Compass Two-One, 4
Kyushu Univ., 5 NICT and 6 Yokohama
Natl. Univ., Japan

R. Takigawa, Kyushu Univ., Japan

15A-4-2
9:30
Effect of Molecular Shape on
Buckling Instabilities of Smectic
Lamellar Phases

15B-4-2
9:20
Electrostatic
Actuation
Cantilevered h-BN Sheet

15C-4-2
9:20
Novel Stacked Floating Fin
Structure Gate-All-Around FieldEffect Transistor for Design andPower Optimization

15D-4-2
9:30
Seamless Fabrication Techniquefor 3D Structures from Micro to
Milli Scales by Using 3D Printerand Backside Exposure Method

M. Kim 1,2, K. Lee 1, S. Kim 1, S. Kim
1, S. Kim 1,2, K.H. Cho 2, S. Kim 3 andB.-G. Park 1, 1 Seoul Natl. Univ., 2
Samsung Electronics Semiconductor
R&D ctr. and 3 Ajou Univ., Korea

T. Tamura 1, K. Yamada 1 and T.
Suzuki 1,2, 1 Gunma Univ. and 2
JST-PREST, Japan

15C-4-3
9:40
Impact of Gate Oxide Densification
Methods on P-Type Pi-Gate PolySi Junctionless Accumulation
Mode (JAM) FinFETs

15D-4-3
9:50
Fracture Strength of a Silicon
Torsional Mirror Resonator Fully
Coated with SubmicrometerThick PECVD DLC Film

D.-R. Hsieh, K.-C. Lin and T.-S. Chao,
Natl. Chiao Tung Univ., Taiwan

W. Zhang, K. Obitani, Y. Hirai, T.
Tsuchiya and O. Tabata, Kyoto Univ.,
Japan

15C-4-4
10:00
ChargeCoupling
between
Polyoxometalate Molecule and a
GaAs-Based
Nanowirefor
Readout of Molecular Multiple
Charge State

15D-4-4
10:10
Micro-Fabricated Alkali Vapor
Cells
Sealedat
Low
Temperature Using asymmetricAu-in-Based Transient Liquid
Phase (TLP) Bonding

K. Sasaki 1, S. Okamoto 1, S. Tashiro
2, T. Asai 1 and S. Kasai 1, 1 Hokkaido
Univ. and 2 Univ. of Tokyo, JapanY. Wang 1,2, Y. Wu 2, X. Xia 2, B.
Zhang 2 and P. Jin 1, 1 Harbin Inst. ofTechnol. and 2 Chinese Academy ofSci., China

M. Sakamoto and I. Hanasaki, Tokyo
Univ. of Agriculture and Technol.,Japan

15A-4-3
9:50
Absorption Mechanism of Metal
Precursors in Resist Polymer for
Improving Etch Resistance
K. Asakawa, N. Sasao and S.
Sugimura, Toshiba Memory, Japanof

D. Yoshikawa, Y. Miyamoto, K. Takei,
T. Arie and S. Akita, Osaka Pref. Univ.,
Japan

15B-4-3
9:40
Synthesis of Sulfur- And
Phosphorous-Doped Graphene
H. Omachi 1, Z. Syrgiannis 2, T. Inoue
1, S. Hatao 3, H. Shinohara 1, H.
Yoshikawa 3, M. Prato 2, 1 Nagoya
Univ., Japan, 2 Univ. di Trieste, Italy, 3Kwansei Gakuin Univ., Japan

15A-4-4
10:10
Improvement of Sensitivity ofChemically Amplified Resists by
AddingDiphenylSulfoneDerivatives

15B-4-4
10:00
Wearable Strain Sensor with
Electrothermal Property Basedon Reduced Graphene Oxide
Modified Conductive Fabric

S. Kawai 1, K. Okamoto 2, H.
Yamamoto 3 and T. Kozawa 2, 1
Hokkaido Univ., 2 Osaka Univ. and 3
Quantum and Radiological Sci. andTechnol., Japan

D. Li 1, D. Wang 1 and Y. Fu 1,2, 1
Jiangnan Univ. and 2 Nantong Univ.,
China

15A-4-5
10:30
Reaction Mechanism of Zr Metal
Resist15C-4-5
10:20
Shape Change Dynamics of Cu
Filament in Double Layer CBRAM

Y. Yamashita 1, T. Chikyow1 J.
Santillan 2 and T. Itani 2, 1 NIMS and2 EIDEC, Japan

R. Ishikawa 1, A. Tsurumaki-Fukuchi 1,
M. Arita 1, Y. Takahashi 1, M. Kudo 2
and S. Matsumura 2, 1 Hokkaido Univ.
and 2 Kyushu Univ., Japan

Author's Interview: 10:50-11:00

Author's Interview: 10:20-10:30

Author's Interview: 12:35-12:45

Author's Interview: 10:30-10:40

Room P2 (Park Plaza BC (B2F)
Coffee BreakRoom A (Park Plaza D (B2F)
15A-5: Electron and Ion BeamTechnologies

Room B (Park Plaza A (B2F)
15B-5: Inorganic
Nanomaterials III

Room C (The Terrace Room (1F))
15C-5: Nanodevices III

Chairs:H. Yamashita (NuflareTechnol.)J. Yanagisawa (Univ. of Shiga Pref.)Chairs:K. Tsukagoshi (NIMS)
M. Osada (Nagoya Univ.)

Chairs:T. Yanagida （Kyushu Univ.)
M. Seki （Univ. of Tokyo)

15A-5-1
11:10
Sources of Resist Surface
Charging in Electron Beam
Lithography (Invited)

15B-5-1
10:45
Heterojunction
Basedon
Atomically Thin Semiconductor
and Its Application (Invited)

N. Nakayamada, H. Nomura and T.
Kamikubo, NuFlare Technol., Japan

K. Tsukagoshi, NIMS, Japan

15C-5-1
10:55
Selective ZnO Deposition on
Polysilicon Nanobelt Device via
Atomic Layer Deposition andDevice-Localized Joule Heating for
H2 Sensing

15D-5-1
10:55
Composite
Nanomaterial
Semiconductor Inks for High
Performance Printed Transistors
and Near Infrared Photodectors(Invited)

Y.-S. Lin and J.-T. Sheu, Natl. Chiao
Tung Univ., Taiwan

Y.-Y. Noh, Dongguk Univ., Korea-3-

Room D (Emina (1F))
15D-5: Organic Nanomaterials
I
Chairs:A. Masuhara (Yamagata Univ.)
R. Hayakawa (NIMS)MNC 2018, November 13-16, 2018, Sapporo Park Hotel, Sapporo, Japan
15A-5-2
11:40
Experimental Demonstration of
Large Depth of Focus Using
Annular Illumination ScanningElectron Microscope
M. Kimura 1, M. Enyama 1, K.
Hamada 1, H. Kazumi 2 and K.
Kurosawa 2, 1 Hitachi and 2 Hitachi
High-Technol., Japan

15B-5-2
11:15
Controlled
Synthesis
andTransport Properties of 2D Oxide
Nanosheets
Y. Shi 1, M. Osada 1,2, T. Sasaki 2, 1
Nagoya Univ. and 2 NIMS, Japan

15A-5-3
12:00
A Novel Ion Beam Generator
Using a Micromachined Si Emitterwith an Integrated Ionic Liquid
Flow Control Structure

15B-5-3
11:35
Integration of Functional Oxide
Nanosheetsfor
SolutionProcessed
Ultra-Thin
Electromagnetic Shielding

N. Van Chinh, L.Van Minh, T. Ono and
H. Kuwano, Tohoku Univ., Japan

T. Taniguchi, S. Li, H. Takehira, M.
Osada, NIMS, Japan

15A-5-4
12:20
Characterization of Proximity
Effects in Helium Ion Beam
Lithography by Direct Monte
Carlo Simulation and Resist
Calibration

15B-5-4
11:55
Atomic Layer Engineering of 2D
Perovskite Nanosheets
M. Osada 1,2 and T. Sasaki 2, 1
Nagoya Univ. and 2 NIMS, Japan

15C-5-2
11:15
Super-Nernstian pH Sensors
Based on Hydrothermally Grown
NiO Nanosheets with SputteredWO3 Nanoparticles

15D-5-2
11:25
Coordination Polymers Boost
Nano- and Micro-Fabrication(Invited)
K. Hirai, Hokkaido Univ., Japan

C.-Y. Kuo, S.-J. Wang, R.-M. Ko and S.Y. Wang, Natl. Cheng Kung Univ.,
Taiwan15C-5-3
11:35
Modification of Photoanode by
Means of Localized Surface
Plasmon Resonance from Au-NPs
Decorated on ZnO-NRs for
Photoelectrochemical Applications
N. Khemasiri 1,2, N. Soyeux 3, P.
Rattanawarinchai 1, S. Jessadaluk 1, A.
Klamchuen 4, A. Rengkasikorn 1, 2, S.
Wirunchit 1,2, S. Rahong 1,2, N.
Kayunkid 1,2 and J. Nukeaw 1,2, 1 King
Mongkut Inst. of Technol. Ladkrabang,
2 Ministry of Education, 3 Univ. of
Burgundy and 4 Natl. Sci. Technol.
Develop. Agency, Thailand

15D-5-3
11:55
Organic
Anti-Ambipolar
Transistor for Multivalued Logic
CircuitK. Kobashi 1,2, R. Hayakawa 1, T.
Chikyow 1 and Y. Wakayama 1,2, 1
NIMS and 2 Kyushu Univ., Japan

15C-5-4
11:55
High Resonsivity of Solar-Blind
Photodetectors Based on an
Exfoliated β-Ga2O3 Flakes
S. Oh and J. Kim, Korea Univ., Korea

15C-5-5
12:15
Nano-Junction
Effecton
Electroluminescence Colors of nZnO Wire or Disk Arrays/p-GaN
Film Heterojunction Light-Emitting
Diodes

C.-L. Lee, S.-W. Chien, K.-Y. Tsai, Natl.
Taiwan Univ., Taiwan

J. Jeong and Y.J. Hong, Sejong Univ.,
Korea

Author's Interview: 12:40-12:50

Author's Interview: 12:05-12:15

Author's Interview: 12:35-12:45

Room A (Park Plaza D (B2F)
15A-6: Photolithography andPatterning

Room B (Park Plaza A (B2F)
15B-6: Inorganic
Nanomaterials IV

Chairs:T. Uchiyama (Toshiba Memory)
T. Harada (Univ. of Hyogo)

Chairs:K. Tsukagoshi (NIMS)
M. Osada (Nagoya Univ.)

15A-6-1
14:10
EUV Material Challenges andSolutions (Invited)

15B-6-1
13:50
Room Temperature coating ofCeramic Film by Aerosol
Deposition (Invited)

Author's Interview: 12:15-12:25

Lunch
Room C (The Terrace Room (1F))
15C-6: Symp. C: Thermal andElectronic Properties ofNanoscale Interfaces

Room D (Emina (1F))
15D-6: Organic Nanomaterials
II

Chairs:S. Okada (Univ. of Tsukuba)
K. Yanagi (Tokyo Metropolitan Univ.)

Chairs:A. Masuhara (Yamagata Univ.)
R. Hayakawa (NIMS)

15C-6-1
13:40
ThermalandThermoelectricTransport in Metal-Coordinated
Polymers:Towards
Flexible
Devices (Invited)

15D-6-1
13:40
Quaternized Polysulfone/N,Ndimethyl Chitosan Based Anion
Conducting Membrane for Fuel
Cell Applications

S.K. Yee, Georgia Inst. of Technol.,
USA

C.Y. Kim, G. Das, N.P.K. Thinh, B.H.
Kim and H.H. Yoon, Gachon Univ.,
Korea

15B-6-2
14:20
Solution-Processed 2D Organic
CrystalsforTransistor
Applications (Invited)

15C-6-2
14:10
Study of the Thermal Properties ofNanoscale Interface with High
Temporal Resolution (Invited)

15D-6-2
14:00
Fabrication of Polymer pn HomoJunction Diodes by Spray
Deposition

Y. Li, Nanjing Univ., China

W. Ma, C. Dong and X. Zhang,
Tsinghua Univ. China

S. Sakiyama, T. Komura, N. Mizutani
and K. Fujita, Kyushu Univ., Japan

15A-6-3
15:20
Fabrication Challenge: Standard
Sample with Programmed Defectfor Evaluation of beyond-7 nmNode Pattern Inspection Tool

15B-6-3
14:50
Conductivity
ModulationinSrVO3-Based
All-Solid-State
Redox Transistor with Ion
Transport of Li+ or H+

15C-6-3
14:40
Measurements of Charge, Heatand Spin Transport in Organic
Semiconductors (Invited)

15D-6-3
14:20
Room-Temperature
Printing
Techniquesfor
Fabricating
Organic Electronics

S. Iida and T. Uchiyama, EIDEC,Japan

M. Takayanagi 1,2, T. Tsuchiya 2, W.
Namiki 1,2, Y. Kitagawa 1,2, T.
Higuchi 1 and K. Terabe 2, 1 Tohoku
Univ. and 2 NIMS, JapanD.
Venkateshvaran,
Cambridge, UK

X. Liu 1, 2, M. Kanehara 2 and M.
Takeo 2, 1 Zhengzhou Univ., China
and 2 NIMS, Japan

G. Vandenberghe, imec, Belgium

J. Akedo, AIST, Japan

15A-6-2
14:40(Invited)
H.
Kawada,
HitachiTechnologies, Japan

High-

-4-

Univ.

of

MNC 2018, November 13-16, 2018, Sapporo Park Hotel, Sapporo, Japan
15B-6-4
15:10
Photoelectron
Spectroscopic
Study on Electronic State andSurface Structure of in-Situ
Cleaved In2O3 (111) Single
CrystalT. Nagata 1, O. Bierwagen 2, Z.
Galazka 3, M. Imura 1, S. Ueda 1, Y.
Yamashita 1 and T. Chikyow 1, 1
NIMS, Japan, 2 Paul-Drude-Institut
für Festkörperelektronik, 3 Leibniz
Inst. for Crystal Growth, Germany

15C-6-4
15:10
Tuning of the Thermoelectric
Properties of High-Purity SingleChirality Single-Walled Carbon
Nanotubes by Electrolyte Gating
Y. Ichinose, A. Yoshida, K. Fukuhara, J.
Eda, H. Okubo, Y. Yomogida and K.
Yanagi, Tokyo Metropolitan Univ.,
Japan

15C-6-5
15:30
ThermalConductivity
Measurement of a Suspended
Single-Walled Carbon Nanotube by
Photoluminescence Spectroscopy
S. Chiashi 1,2, K. Yoshino 2, T. Kato 2,
Y. Saito 2, J. Shitaba 2, T. Hanashima
2, K. Nagano 2 and Y. Homma 2, 1
Univ. of Tokyo and 2 Tokyo Univ. of Sci.,
Japan

Author's Interview: 15:40-15:50

Author's Interview: 15:30-15:40

Author's Interview: 15:50-16:00

Author's Interview: 14:40-14:50

Room P (Park Plaza BC (B2F)
Coffee BreakRoom P2 (Park Plaza BC (B2F))

15P-7: Poster Session I (16:00-18:00, Nov. 15)
Photolithography and Patterning
15P-7-1
15P-7-2Fabrication of High-Aspect-Ratio ApplicationofProjection
Transmission Grating Using Dry Exposure Using a Gradient Index
Development Process for 10-nm Lens Array and Wet Etching to
EUV Resist Evaluation by EUV Texturing and HydrophobicInterference Lithography
Property Control of StainlessM. Yoshifuji, S. Niihara, T. Harada, and Steel Plates
T. Watanabe Univ. of Hyogo, Japan

15P-7-3
Development and Its Application of
One-Step Fabrication Process forMulti-Angled Micro-Structure via
Synchrotron X-ray Lithography
K. Kim, K. Park, G. Lim and J.H. Kim,
POSTECH, Korea

T. Horiuchi, Y. Kazama, H. Yoshida, A.
Yanagida and H. Kobayashi, Tokyo
Denki Univ., Japan

Electron and Ion Beam Technologies
15P-7-4
15P-7-5
Periodic
DiamondPattern Three-Dimensional
Trajectory
Formation on Resist by Simple Simulation of Fogging Electrons
Orthogonally-Crossed Two Line- in Scanning Electron Microscope
Scans of the Electron BeamY. Ito, T. Donga, K. Morimoto and M.
K. Okada, T. Hioki, M. Ichimiya and J.
Yanagisawa, Univ. of Shiga Pref.,Japan

Chair:A. Yamaguchi (Hitachi)

Kotera, Osaka Inst. of Technol.,Japan

Chair: J. Yamamoto (Hitachi)

15P-7-6
Energy Analysis of Fogging
Electrons by The Same Electric
Field

15P-7-7
Energy Analysis of Fogging
Electrons in Scanning Electron
Microscope

H. Mizuno, S. Nisimura, K. Kubo and M.
Kotera, Osaka Inst. of Technol., Japan

K. Morimoto, T. Donga, Y. Ito and M.
Kotera, Osaka Inst. of Technol.,Japan

15P-7-860 keV Ar Ion Irradiation Effect on
Ge(110) Surfaces
R. Tsukamoto 1, M. Ichimiya 1, K.
Takamiya 2, A. Kinomura 2 and J.
Yanagisawa 1, 1 Univ. of Shiga Pref.
and 2 Kyoto Univ., Japan

Resist and Directed Self-Assembly
15P-7-9
15P-7-10
Refractive
Index
Tunable Rapid Self-Assembly of Large
Metamaterial Fabrication by Block Area, Sub-10 nm Nanopattern
Copolymer Self-Assembly
with
High
Flory-Huggins
K.H. Han, J.Y. Kim, J. Shin and S.O. Interaction
Parameter Block
Kim, KAIST, Korea
Copolymer by Flash Light
J.H. Kim, H.M. Jin , D.y. Park, K.J. Lee
and S.O. Kim, KAIST, Korea

Chair: H. Oizumi (Gigaphoton) and S. Nagahara (Tokyo Electron)

15P-7-11
Laser Writing Block Copolymer
Self-Assembly on the Chemically
Modified
GrapheneLight
Absorbing Layer
G.G. Yang, H.M. Jin and S.O. Kim,
KAIST, Korea

15P-7-13
The Revolution of Machine
Learning to Accelerate The
DevelopmentofNanotechnologies is Becoming a
Reality
A. Derville, G. Gey, J. Baderot, S.
Martinez, G. Bernard, J. Foucher,
POLLEN Metrology, France-5-

15P-7-12
Au and Ag Nanoparticles DualCoated Calcium Alginate Fibers
with Uniform Single-Layered
Structure
Fabricatedby
Molecule-Directed
SelfAssembly
L. Dong 1, X. Li 2, L. Yao 1, S. Xu 1,
S. Xu 1 and G. Zhang 1, 1 Nantong
Univ., China and 2 Shinshu Univ.,Japan

MNC 2018, November 13-16, 2018, Sapporo Park Hotel, Sapporo, Japan
Chairs: S. Chiashi (Univ. of Tokyo)

Nanocarbons
15P-7-14
Synthesis of S Doped g-C3N4
Pinhole Nanosheet for Selectively
Detection of Silver Ion

15P-7-15
Geometric
andElectronic
Structures of Two-Dimensionally
Polymerized Triptycene

15P-7-16
Hydrogen Boride Sheets Showing
Catalytic Activity As Solid Acid
Catalyst

A.N. Kadam, W.S. Jung, S.H. Parkand S.W. Lee, Gachon Univ., Korea

Y. Fujii, M. Maruyama and S. Okada,
Univ. of Tsukuba, Japan

A. Fujino 1, H. Nisino 1, R. Ishibiki 1, S.
Ito 2, T. Fujitani 1,3, J. Nakamura 1, H.
Hosono 2, T. Kondo 1,2, 1 Univ. of
Tsukuba, 2 Tokyo Inst. of Technol. and3 AIST, Japan

15P-7-18
Mechanism of Oxygen Reduction
Reaction Studied with Model
Catalystsof
Pyridinic-N
Containing Molecules on HOPG

15P-7-19
Temperature Dependence ofCatalytic Activity in Graphitizationfor Sn Nanoparticles

15P-7-20
Theoretical
StudyonAdsorption/DesorptionofHydrogen Molecule to the Surfaceof Graphene Nanoflakes

T. Akimitsu, R. Shibuya, K. Takeyasu,
T. Kondo and J. Nakamura, Univ. of
Tsukuba, Japan

15P-7-22
Facile Process for Additive-Free
Electrode
Fabrication
with
Reduce Graphene Oxide by HighKinetic Spray for Flexible Lithium
Ion Battery Anodes
S.D. Kim 1, J.-G. Lee 2, T.-G. Kim 2, K.
Rana 3, J.Y. Jeong 1, J.H. Park 1, S.S.
Yoon 2 and J.-H. Ahn 1 ,1 Yonsei Univ.,
2 Korea Univ., Korea and 3 Ctr PowerRes. Inst., India

M.I. Araby, S. Sharma, S. Elnobi, G.
Kalita and M. Tanemura, Nagoya Inst.
of Technol., Japan

H. Kawabata and H. Tachikawa,
Hokkaido Univ., Japan

15P-7-17
Composite of Nanocellulose with
SnO2 As Electrode Materials
Q.N. Tran, I.T. Kim, J. Hur, C.W. Bark,
H.W. Choi and S.J. Park, Gachon
Univ., Korea

15P-7-21
Improvement
ofPower
Generating
Abilityof"Thermoelectric
Power
Generating Threads'' Using
Carbon-Nanotube-Composite
Threads
R. Arakaki and T. Oya, Yokohama
Natl. Univ., Japan

15P-7-23
Evaluation of
MoS2 Film
Fabricated by DC Bias Sputtering
Methodwith
Raman
Spectroscopy

15P-7-24
Structural and Electrical Propertiesof Graphene-Polymer Composites
Observed under Transmission
Electron Microscope

Y. Oyanagi 1, S. Ishihara 1,3, Y.
Hibino 1,3, N. Sawamoto 1, T. Ohashi
2, K. Matsuura 2, H. Wakabayashi 2
and A. Ogura 1, 1 Meiji Univ., 2 Tokyo
Inst. of Technol. and 3 JSPS, Japan

N.F. Hasmuni, I. Sudin, M. Aziz, A.Z.A.
Kadir and M.Z.M. Yusop, Univ.
Teknologi Malaysia, Malaysia

15P-7-25
DirectElectroluminescence
Imagingof
Polycrystalline
Monolayer Transition Metal
Dichalcogenide Light-Emitting
Devices
H. Matsuoka 1, T. Juliette 1, L.-J. Li 2,
T. Sakanoue 1, J. Pu 1 and T.
Takenobu 1, 1 Nagoya Univ., Japanand 2 KAUST, Saudi Arabia

15P-7-26
ElectricalandTransport
Properties of Single Hybrid
Graphite-Diamond
Nanowire
Grown via a Wet Chemical Route
L.-C. Li and K.W. Sun, Natl. Chiao
Tung Univ., Taiwan

Nanodevices
15P-7-27
Ultra-Low Leakage Technology
for Sub 10nm FinFET and
GAAFET by Optimized Anti
Punch-Through Implantation

Chair: S. Hara (Hokkaido Univ.)

15P-7-28
Investigation of SOI-CMOS
Integrated Thermocouple andHeater for Antenna-Coupled
Bolometer

15P-7-29
Exploring the Origin of Vth
Fluctuation Caused by Ion
Implantation to Source and Drain
Extensions of SOI Tri-Gate
FinFETs by 3D Process andDevice Simulations

S. Kim 1,2, S. Kim 1,2, K. Lee 1, S. Kim
1, S. Kim 1, S. Kim 1,2, K.H. Cho 2, S.
Kim 3 and B.-G. Park 1, 1 Seoul Natl.
Univ., 2 Samsung Electronics and 3
Ajou Univ., Korea

D. Elamaran, H. Satoh, N. Hiromotoand H. Inokawa, Shizuoka Univ.,
Japan

15P-7-31
Double-Gate
Single-ElectronTransistor Characteristics ofSingle-Layer Fe-MgF2 GranularFilms

15P-7-32
Fabrication and Evaluation ofMulti Layered Nanoparticles
Embedded
V-Grooved
Junctionless-FET

15P-7-33
Nonequilibrium Green Function
Simulation of Coupled ElectronPhonon Transport in OneDimensional Nanostructure

T. Gyakushi, Y. Asai, A. TsurumakiFukuchi, M. Arita and Y. Takahashi,
Hokkaido Univ., Japan

T. Ban 1, M. Uenuma 2, S. Migita 3, I.
Yamasita 2, Y. Uraoka 2 and S.
Yamamoto 1, 1 Ryukoku Univ., 2
NAIST and 2 AIST, Japan

Y. Kajiwara and N. Mori, Osaka Univ.,
Japan

15P-7-35
A
Stand-Alone
Synaptic
Transistor Embedding SiGe
Quantum Well And Charge-Trap
Layer with Capabilities of Shortand Long-Term Potentiation in
The Biological System

15P-7-36
Sub-Bandgap
Photodetection
from Plasmonic Titanium Nitride
and Germanium Heterostructure

15P-7-37
Fabrication and Evaluation of TiNAg Nano Cone Array toward
Localized
Surface
PlasmonResonance-Based Optical Sensor
Applications

S.L. Shinde 1, S. Ishii 1 and T. Nagao
1,2, 1 NIMS and 2 Hokkaido Univ.,Japan

E. Yu 1, S. Cho 1, and B.-G. Park 2, 1
Gachon Univ. and 2 Seoul Natl. Univ.,
Korea

15P-7-39
Carbon Nanotube Sheet-Based
Gas Sensor to Detect Carbon
Monoxide Gas Molecules

15P-7-40
Carbon-Based Conductive Fiberwith Elastic Micro-Beads forHighly Sensitive Strain Sensors

J.Y. Lee 1,2, J.K. Kim 1,2, S.H. Kong 1
and D. Jung 2, 1 Kyungpook Natl.
Univ. and 2 KITECH, Korea

S. Jang, J. Lee and C. Pang,
Sungkyunkwan Univ., Korea

15P-7-30
Self-Consistent Simulations ofTransport Characteristics inPlane MoS2/WS2 Heterojunction
Tunnel Transistors
T. Kuroda, F. Hashimoto and N. Mori,
Osaka Univ., Japan

T. Tsutsumi, Meiji Univ., Japan

15P-7-34
Green Nano-Second Laser
Annealing for S/D Dopants
Activationinn-Channel
Polycrystalline-Germanium ThinFilm Transistors via Continuous
Wave Laser Crystallization
Y.-S. Li, H.-H. Liang, C.-Y. Wu and H.C. Cheng, Natl. Chiao Tung Univ.,
TaiwanD. Kawasaki 1, H. Yamada 1, K. Maeno
1, K. Sueyoshi 1, H. Hisamoto 1 and T.
Endo 1,2, 1 Osaka Pref. Univ. and 2
JST-PRESTO, Japan

15P-7-41
Fabrication and Characterizationof Perovskite Solar Cells with
ZnGa2O4
Mixed
TiO2
PhotoelectrodeH. Lee, C.w. Bark and H.W. Choi,
Gachon Univ., Korea-6-

15P-7-38
ZnO Nanowire FunctionalizedGold
Nanoparticles
Electrochemical Electrodes forLabel-Free Glucose Detection
P. Rattanawarinchai 1, N. Khemasiri
1,2, N. Soyeux 3, S. Jessadaluk 1, A.
Klanchuen 4, S. Wirunchit 1,2, A.
Rengkasikorn 1,2, N. Kayunkid 1,2,
D. Phromyothin 1, S. Rahong 1,2 andJ. Nukeaw 1,2, 1 King Mongkut Inst.
of Technol. Ladkrabang, 2 Ministry of
Education, Thailand, 3 Univ. of
Burgundy, France and 4 Natl. Sci.
Technol. Develop. Agency, Thailand

15P-7-42
Fabrication and Performance
Evaluation of Enzyme-Type
Biofuel Cell Using Electrode
Modified with Two Det-Type
Enzymes by Covalent Bonding
H. Fujita, Y. Nishioka and S. Imai,
Nihon Univ., JapanMNC 2018, November 13-16, 2018, Sapporo Park Hotel, Sapporo, Japan
Nanofabrication
15P-7-43
Threshold Switching of NbOx
Device Prepared by DC Reactive
Sputtering
R. Nakajima, A. Azuma, T. Shimizu, T.
Ito and S. Shingubara, Kansai Univ.,
Japan

Inorganic Nanomaterials
15P-7-45
Enhanced Leakage Current
Properties for C-Axis Preferred
Bismuth Titanate Ceramic Films
Prepared by Aerosol Deposition
MethodM. Suzuki, T. Tsuchiya and J. Akedo,
AIST, Japan

Chair: Y. Liu (AIST)

15P-7-44
PreparationofIon-Track
Nanopores with Different Profiles:
Precise Control of Depth-Energy
Deposition Distribution
Y. Sato 1, H. Koshikawa 2, S.
Yamamoto 2, M. Sugimoto 2, S.
Sawada 2 and T. Yamaki 1,2, 1
Gunma Univ. and 2 Quantum andRadiological Sci. and Technol., Japan
Chair: J. Kano (Okayama Univ.)

15P-7-46
Nickel Nanoparticles Supported
on MIL-101 as a Potential
Catalyst for Urea ElectroOxidation
H.S. Gil, N.T.Q. Tran, D.T. Nhac and
H.H. Yoon, Gachon Univ., Korea

15P-7-49
Preparation of Mesoporous Thin
Films by Using Cobalt/Chitosan
on Fluorine-Doped tin Oxide
Glass

15P-7-50
Improvement of Crystallinity of
ZnO with Inserting Multi-buffer
Layer
by
RF
Magnetron
Sputtering

H.-C. Yang 1 and J.-C. Tsai 2, 1 Kun
Shan Univ. and 2 TSMC, Taiwan

A. Mori 1, C. Takada 1, S. Guan 1, S.
Komuro 2 and X. Zhao 1, 1 Tokyo
Univ. of Sci. and 2 Toyo Univ., Japan

15P-7-53
Temperature-Persistent High Spin
Polarization and Its Dynamics in
InGaAsQuantum
Dots
Embedded in a GaAs Quantum
Well

15P-7-54
The Effect of Yttrium Addition on
the Microstructures and Electrical
Properties of Cu-Mn Alloy Thin
Film

M. Takishita, S. Hiura, J. Takayama
and A. Murayama, Hokkaido Univ.,
Japan

15P-7-57
MCD Peak Shift of Mn-Ga CoDoped ZnO Thin Films Fabricatedby RF Magnetron Sputtering
Y. Tamamoto, M. Yamanobe and X.
Zhao, Tokyo Univ. of Sci., Japan

Y.-T. Lee and Y.-C. Lee, Natl. Pingtung
Unvi. of Sci. & Technol., Taiwan

15P-7-58
Characteristics
ofCalcium,
Strontium and Vanadium Doped
TiO2 Nanoparticles by Solid-State
Reaction Method for Perovskite
Solar Cells
H.V. Quy, D.H. Truyen, H. Rui, M.
Kim, S. Kim and C.W. Bark, Gachon
Univ., Korea

15P-7-47 Withdrawn
Self-Aligned Oxide Thin Film
Transistors Using Metal Masking
on Gas Teatment
S.H. Jung, C.H. Ahn and H.K. Cho,
Sungkyunkwan Univ., Korea

15P-7-51
OpticalStudyonThermalActivation Processes of Carrier
Dynamics in In0.3Ga0.7N Nanodisks
Y. Chen 1, T. Kiba 2, J. Takayama 1, A.
Higo 3, T. Tanikawa 3, S. Samukawa 3
and A. Murayama 1, 1 Hokkaido Univ.,
2 Kitami Inst. of Technol. and 3 Tohoku
Univ., Japan

15P-7-55
Synthesis and Characterization ofIron-Doped Chalcogenide Spinel
Nanoparticles
C.-L. Pan, A. Spivakov, B.-Y. Chen, Y.C. Chang, H.-S. Hsu, Y.-T. Tseng andC.-R. Lin, Natl. Pingtung Univ., Taiwan

15P-7-48
TiO2-Intercalated
Graphene
Oxides with Highly Efficient
Photocatalytic Degradation for
Methylene BlueS. Xu 1, L. Dong 1, S. Xu 1, G.
Zhang1 and C. Zhu 1, 1 Nantong
Univ., China and 2 Shinshu Univ.,
Japan

15P-7-52
Modal Gain at Excited States in
High-Density InGaAs Quantum
Dots Investigated by Variable
Stripe Length Method
A. Ohtake, S. Hiura, A. Washida, J.
Takayama and A. Murayama,
Hokkaido Univ., Japan

15P-7-56
Spectroscopic Studies of WellDispersed
Magnetite
Nanoparticles
Synthesizedunder Atmospheric Pressure
Y.-C. Chang, A. Spivakov, C.-L. Pan,
B.-Y. Chen, H.-S. Hsu, Y.-T. Tsengand C.-R. Lin, Natl. Pingtung Univ.,
Taiwan15P-7-59
Facile Synthesis of Cubic Hematite(α-Fe2O3) with Nanosized Gold
Deposition and Its Enhanced
Photocatalytic Activity

15P-7-60
Properties of SrMnO3 Films
Grown on the SrTiO3 Substrateby Rf Sputtering with off-Axis
Angle

W.S. Jung, S.H. Park, A.N. Kadam and
S.W. Lee, Gachon Univ., Korea

H. Rui, S.M. Kim, D.H. Truyen, H.V.
Quy, N.T. Nguyen, T. Rui and C.W.
Bark, Gachon Univ., Korea

15P-7-61
Magnetic
Behaviorof
FeO@Carbon
Core-shell
Nanoparticles
PreparedbyThermal Pyrolysis
B.-Y. Chen, C.-L. Pan, Y.-C. Chang, Y.T. Tseng and C.-R. Lin, Natl. Pingtung
Univ., Taiwan

Organic Nanomaterials
15P-7-62
Equilibrium Studies of theAdsorption of Copper Ion onto
Nanobiomaterials
H.-C. Yang and H.-H. Chou, Kun Shan
Univ., Taiwan

Chair: A. Masuhara (Yamagata Univ.)

15P-7-63
Silver Nanoparticles@DendronExfoliated Reduced Graphene
Oxide Nanohybrids for SurfaceEnhanced Raman Scattering(SERS) Detection

15P-7-64
Anion Exchange Membranes
Basedon
Poly(phenyleneoxide)/Cellulose Composites
D.H. Kang, G.Das and H.H. Yoon,
Gachon Univ., Korea

Y.-W. Cheng 1, C.-H. Wu 1, W.-T.
Chen 2, T.-Y. Liu 2 and R.-J. Jeng 1, 1
Natl. Taiwan Univ. and 2 Ming Chi
Univ. of Technol., Taiwan

15P-7-66
Transport Studied of Perovskites
by 1/f Noise and Piezoelectric
Photothermal Spectroscopy

15P-7-67
Ion
Conducting
HybrideElectrolyte Using Functionalized
Silica Particle for Li-Ion Batteryon

K. Lin, A*STAR, Singapore

B.M. Jung 1, U.H. Choi 2 and S.-B.
Lee 1, 1 Korea Inst. of Materials Sci.
and Pukyong Natl. Univ., Korea

15P-7-65
Properties
ofWater-Gated
Organic Field-Effect Transistors
DependingonSurface
Morphology, Electrode Metals
and Lipid Membrane
T.R. Nguy 1,2, R. Hayakawa 1, V.
Klinic 3, M. Petit 3, J.M. Raimundo 3,
A. Charrier 3 and Y. Wakayama 1,2,
1 NIMS, 2 Kyushu Univ., Japan and 3
CNRS, France

15P-7-68
Observation of Ambipolar Carrier
Transport
in
DiarylethenePhotochromic-Channel
Transistors
Y. Kurokawa 1,2, R. Hayakawa 1, S.
Shimada 3, K. Higashiguchi 3, Y.
Noguchi 2, K. Matsuda 3 and Y.
Wakayama 1, 1 NIMS, 2 Meiji Univ. and3 Kyoto Univ., Japan-7-

15P-7-69
Fabricating
Novel
CarbonElectrode Membrane by RAFT
Polymerization Method for PEFC
T. Nohara 1, S. Keiji 1, Y. Takahashi
1, S. Sekine1, T. Arita 2, A. Masuhara
1, 1 Yamagata Univ. and 2 Tohoku
Univ., JapanMNC 2018, November 13-16, 2018, Sapporo Park Hotel, Sapporo, Japan
15P-7-70
Performance
Researchof
Polypropylene Fibers Treated by
Nano Titanium Dioxide(NanoTiO2) Anti-Ultraviolet Finishing

15P-7-71
Nanometer-Scale Observation ofDielectric Breakdown Path inInsulating Epoxy Resin by Using
Micro-Gap Electrode Device

M. Zhu, S. Li and C. Zang, Nantong
Univ., China

R. Sankawa 1, T. Onishi 1, K.
Takahashi 1, M. Tomita 1, T.
Nakamura 2, K. Mura 2, T. Yoshimitsu
2, and T. Watanabe 1. 1 Waseda Univ.
and 2 Toshiba Mitsubishi-ElectricIndustrial Systems, Japan

15P-7-72
Molecular Design of HighPerformance π-Stacking Materials
Caused by Hole Capture
R. Iura and H. Tachikawa, Hokkaido
Univ., Japan

15P-7-73
Significant Improvement of The
Thermoelectric Properties ofPedot:Pss by The Synergetic
Effect of Nitric Acid and thePressure of N2 Gas
M.T.Z. Myint 1, A.K.K. Kyaw 2, T.
Yoshiyama 1, H. Inoue 1, T.
Nishikawa 1, M. Hada 1 and Y.
Hayashi 1, 1 Okayama Univ., Japanand 2 Southern Univ. of Sci. andTechnol., China

15P-7-74
Controlling The Orientation ofMetal-Organic
Framework
Crystals on Si wafer by The
Carboxylic Acid Treatment on
Surface
C. Lee, S. Shin, C.J. Park, M. Kim and
M.W. Shin, Yonsei Univ., Korea

NanoTool
15P-7-75
Graphene Device Modification by
Using Helium Ion Beam

Chair: K. Sugano (Kobe Univ.)

15P-7-76
Structural
AnalysisofGermanene on Al(111) by Ion
Scattering Spectroscopy

15P-7-77
Real-Space Characterization of
Reactivity towards HydrogenAtoms at Sb2Te3(111) Surface

S. Kinoshita, O. Kubo, H. Kagitani, R.
Sugahara, H. Tabata and M.
Katayama, Osaka Univ., Japan

S.H. Su 1 and J.C.A. Huang 1,2, 1 Natl.
Cheng Kung Univ. and 2 Ministry of Sci.
and Technol., Taiwan

15P-7-79
Development of Multiple-Probe
AFM Combined with SEM forInvestigation of Neuromorphic
Nanowire Network System

15P-7-80
Delivery of External Substance
into
Mouse
MyoblastbyFemtosecond Laser Induced
Microbubbles

15P-7-81
Introductionof
Megadalton
Molecules into Tobacco BY-2 Cells
byFemtosecond
Laser
Photoporation

15P-7-82
Porous Silicon Chips Graftedwith Flexible Styrenic Fragment
for the Sensitive Detection of
Volatile Organic Compounds

Y. Shingaya 1, R. Higuchi 1, M. Li 1, Q.
Li 1,2 and T. Nakayama 1,2, 1 NIMS
and 2 Univ. of Tsukuba, JapanR. Yasukuni 1, A. Koyanagi 1, G.
Moran 2, K. Okano 1, S. Yamada 1,
R. Meallet-Renault 2 and Y.
Hosokawa 1, 1 NAIST and 2 Univ.
d'Orsay Paris-Sud, France

T.I. Rukmana 1, S. Yamada 1, K. Okano
1 and M. Ohtani 1, G. Moran 2, T.
Demura 1, R. Yasukuni 1 and Y.
Hosokawa 1, 1 NAIST, Japan and 2
Univ. d-Orsay Paris-Sud, France

V.-T. Vo, T.-A. Nguyen and S.-W. Lee,
Gachon Univ., Korea

15P-7-83
Nonlinear Response of Oxygen
Adsorption on ZnO Nanorods: theDevelopmentofRoom
Temperature Gas Sensor

15P-7-84
Surface-Enhanced
Raman
Spectroscopy of DNA Bases
Using Gold Nanoparticle Dimer
Array

15P-7-85
Wavelength
Detection
byOptomechanical Resonator with
Spiral Bull's Eye Antenna

15P-7-86
Fabrication of Movable MIM
Metamaterial with Air Gap
Structures

F.-M. Chang, S. Brahma, C.-W. Yang,
C.-H. Wu, T.-J. Wu, C.-S. Huang and
K.-Y. Lo, Natl. Cheng Kung Univ.,
TaiwanK. Maruoka, K. Ikegami, A. Uesugi, K.
Sugano and Y. Isono, Kobe Univ.,
Japan

K. Penekwong 1, S. Warisawa 1, T.
Sugaya 2, S. Hashimoto 2, Y. Kawano
2 and R. Kometani 1, 1 Univ. of Tokyoand 2 Tokyo Inst. of Technol., Japan

S. Sekiguchi, Y. Kanamori and K.
Hane, Tohoku Univ., Japan

M.E. Schmidt 1, M. Haque 1, S. Kubo
1, M. Muruganathan 1, S. Ogawa 2and H. Mizuta 1,3, 1 JAIST, 2 AIST,Japan and 3 Hitachi Europe, UK

Microsystem Technology and MEMS
15P-7-87
15P-7-88
Enhancing the Current state of Influence of Porosity on Tensile
Aluminum Nitride Contour-Mode Mechanical
PropertiesofResonators by Minimizing the Sintered Porous Silver Films
Damping and Optimizing the K. Wakamoto 1, Y. Mochizuki 2, T.
Bottom Electrode Design
Otsuka 1, K. Nakahara 1 and T.

15P-7-89
Time-Resolved X-ray Diffraction
Measurement during Exothermic
Reaction of Al/Ni Multilayer
Powder by synchrotron Radiation
with High-Speed Two-Dimensional
DetectorNamazu 2, 1 ROHM and 2 Aichi Inst.
of Technol., Japan

15P-7-91 Withdrawn
Process Dependence of Electrical
Properties of a-Si/TiN Structure
for Microbolometer Applications

15P-7-92
Fabrication of Tunable FabryPerot
Interferometer-BasedInfrared
Micro-Spectrometer
Utilizing Electromagnetic Force

15P-7-93
ModificationofFrequency
Properties of Surface Acoustic
Wave Devices Using Thin Films of
Aluminum nitride

D. Jung 1, J.Y. Lee 1,2, J.K. Kim 1,2,
S.H. Kong 1 and D. Jung 2, 1
Kyungpook Natl. Univ. and 2 KITECH,
Korea

S. Murakami, S. Rikimaru and T. Ito,
Kyushu Inst. of Technol., Japan

15P-7-96
DevelopmentofPd-based
MEMS Hydrogen Sensor forTransformer Oil

15P-7-97
Development of Battery-Free
Underground Sensors and Its
Wireless Measurement System

M. Lee, V.V. Kondalkar, U. Lim and K.
Lee, Ajou Univ., Korea

S. Kim, L. xiang, J. Kim and K. Lee,
Ajou Univ., Korea

15P-7-95
Development of Humidity Sensor
for Real-Time Monitoring ofInsulating
OilinElectric
Transformer
G. Ryu, V. kondalkar, Y. Lee and K.
Lee, Ajou Univ., Korea

F. Wakaya and K. Oosawa, Osaka
Univ., Japan

Chairs: Y. Tomizawa (Toshiba) and R. Takigawa (Kyushu Univ.)

S.I. Jung, C. Ryu and H.J. Kim,
DGIST, Korea

H.-S. Jeon and W.-G. Lee, Natl.
Nanofab Ctr, Korea

15P-7-78
Interaction
between
Eddy
Currents Induced by Oscillating
Magnetic Moment in MagneticForce Microscopy

S. Miyake, R. Yamamoto 1, S.
Kanetsuki 2, T. Namazu 2 and T.
Koganezawa 3, 1 Kobe City College ofTechnol., 2 Aichi Inst. of Technol. and 3
Japan Synchrotron Radiation Res.
Inst., Japan-8-

15P-7-90
Micro-Machined Flow Sensor
Formed on Copper on Polyimide
Substrate and Its Respiration
Measurement Application
A. Kato 1, Y. Hasegawa 1, K.
Taniguchi 1, M. Matsushima 2, T.
Kawabe 2 and M. Shikida 1, 1
Hiroshima City Univ. and 2 Nagoya
Univ., Japan

15P-7-94
Grinding
andChemicalMechanical Polishing Process ofMicropore
X-ray
OpticsFabricated with Deep Reactive
Ion Etching
A. Fukushima 1, Y. Ezoe 1, K.
Ishikawa 2, M. Fujitani 1, M.
Numazawa 1, D. Ishi 1, R. Otsubo 1,
H. Nagatoshi 1, H. Suzuki 1, T. Yuasa
1, T. Ohashi 1 and K. Mitsuda 2, 1
Tokyo Metropolitan Univ. and 2
JAXA, Japan

15P-7-98
Effect of Oxidation TemperatureontheThermoelectric
Performance of the Plate-Type
Thermoelectric Power Generator
N. Ogi and H. Tohmyoh, Tohoku
Univ., JapanMNC 2018, November 13-16, 2018, Sapporo Park Hotel, Sapporo, Japan
15P-7-99
The Implantation of GaN Deep
Etchnig for Flip-Chip Micro-LED
Arrays15P-7-100
Design and Fabrication of a
Coupled Dual-Coil for Fingerprint
Sensor Application

C. Liou, M. Hsieh, F. Shih, Y. Huang, Z.
Hu and C. Tsou, Feng Chia Univ.,
TaiwanS. Lin, M. Hsieh, Y. Huang, F. Shih, Z.
Hu and C. Tsou, Feng Chia Univ.,
Taiwan15P-7-103
Fabrication and Operation of
Suspended-Polymer-BasedSpatial Light Modulator

15P-7-104
Laterally-Driven MEMS Tuning
Fork Resonator with a p-n Diode
Actuator and p-n Diode Sensor

Y. Hanabusa , T. Ikuta and K.
Maehashi, Tokyo Univ. of Agriculture
and Technol., Japan

D. Nagai, F. Miyazaki, H. Tanigawa, T.
Furutsuka
andK.
Suzuki,Ritsumeikan Univ., Japan

15P-7-101
Elctrowetting Device With Liquid
Organic Semiconductor Emulsion
H. Kuwae 1, A. Fujiwara 1, K.
Sakamoto 1, J. Oshima 2, S. Shoji 1
and J. Mizuno 1, 1 Waseda Univ. and 2
Nissan Chemical, Japan

Room A (Heian 3,4, 2F)
18:20-20:20

Banquet-9-15P-7-102
Stacking of Through-Silicon-via
Chip Formed by Notchless Si
Etching and Wet Cleaning ofFirst Metal Layer
N. Watanabe 1, H. Kikuchi 2, A.
Yanagisawa 2, H. Shimamoto 1, K.
Kikuchi 1, M. Aoyagi 1, A. Nakamura
2 and K. Yabe 2, 1 AIST and 2 LAPIS
Semidonductor, JapanMNC 2018, November 13-16, 2018, Sapporo Park Hotel, Sapporo, Japan

Friday, November 16
Room A (Park Plaza D (B2F)
16A-8: Symp. B: Recent
Progress of Atomic Layer
Processing (ALP) Technology

Room B (Park Plaza A (B2F)
16B-8: Nanocarbons II

Chairs:T. Nabatame (NIMS)
H. Arimoto (AIST)

Chairs:D. Kondo (Fujitsu Labs.)
K. Yanagi (Tokyo Metropolitan Univ.)

16A-8-1
9:00
Ultra-Thin Ferroelectric HfZrO2 by
Atomic-Layer Deposition (ALD)
for Steep Slope Transistors
Application (Invited)

Room C (The Terrace Room (1F))
16C-8: Symp. D: BioMEMS, Lab
on a Chip, andNanobiotechnology

Room D (Emina (1F))
16D-8: Nanofabrication I

Chairs:A. Miura (Hokkaido Univ.)
S. Kumagai (Toyota Technological Inst.)

Chairs:R. Hasunuma (Tsukuba Univ.)
K. Tomioka (Hokkaido Univ.)

16B-8-1
9:00
Bottom-Up Chemical Synthesisof Atomically Precise Graphene
Nanoribbons
and
Their
Potentials (Invited)

16C-8-1
9:00
Three
Dimensional
UV
Lithography Technologies for
Microphysiological
Systems(Invited)

16D-8-1
9:00
Etched Ge Surface Treatment for
Ge NW/fin FETs (Invited)

M.H. Lee 1, C.-Y. Liao 1, G.-Y. Siang 1,
C. Lo 1, H.-Y. Chen 1, S.-Y. Chen 1, Y.J. Tseng 1, K.-T. Chen 1,2, S.T. Chang
2, and K.-S. Li 3, 1 Natl. Taiwan
Normal Univ., 2 Natl. Chung Hsing
Univ. and 3 Natl. Applied Res. Labs.,
TaiwanA. Narita and K. Müllen, Max Planck
Inst. for Polymer Res., Germany

Y. Hirai, Kyoto Univ., Japan

16A-8-2
9:30
Consecutive
Area-Selective
Deposition Using Self-Assembled
Monolayer (Invited)

16B-8-2
9:30
Thermal Stability and Chemical
Stability of Hydrogen Boride
Sheets16C-8-2
9:30
Stimulation of Cells by Cold
Atmospheric Plasma for Wound
Treatment (Invited)

J. Kim 1, H.S. Kim 1, J. Huang 1, J.
Mohan 1, L. Cheng 1, S. Kim 1, M.M.
Sung 2 and J. Lee 3, 1 Univ. of Texas
Dallas, USA, 2 Hanyang Univ. and 3
Kookmin Univ., Korea

R. Ishibiki 1, A. Fujino 1, T. Goto 1, H.
Nishino 1, S. Ito 2, N.T. Cuong 1, M.
Miyauchi 2, J. Nakamura 1, H.
Hosono 1,2, and T. Kondo 1, 1 Univ.
of Tsukuba and 2 Tokyo Inst. ofTechnol., Japan

T. Shimizu, AIST, Japan

16A-8-3
10:00
Study of High-k Gate Insulator for
GaN Power Device by Atomic
Layer Deposition (Invited)

16B-8-3
9:50
Energetics
andFormation
Mechanisms
ofin-Plane
Heterostructures of Grapheneand h-BN

16C-8-3
10:00
Toward a Data-Driven Strategy for
Designs of Biomaterials (Invited)

T. Nabatame 1, Y. Irokawa 1, K.
Shiozaki 2 and Y. Koide 1, 1 NIMS and2 Nagoya Univ., Japan

16B-8-4
10:10
In Situ TEM Study of MechanicalFolding of MoS2 Crystals Grown
on Graphite

M. Kurihara, Hitachi, Japan

S. Sharma, R. Mahyavanshi, G. Kalita
and M. Tanemura, Nagoya Inst. ofTechnol., Japan

Author's Interview: none

16D-8-2
9:30
EvaluationofThermalConductivity Characteristics in Si
Nanowire Covered with Oxide by
UV Raman Spectroscopy
R. Yokogawa 1,2, M. Tomita 1,3 T.
Watanabe 2 and A. Ogura 1, 1 Meiji
Univ., 2 JSPS and 3 Waseda Univ.,
Japan

T. Hayashi, Tokyo Inst. of Technol. and
JST-PRESTO, Japan

H. Sawahata 1, A. Yamanaka 2, M.
Maruyama 1 and S. Okada 1, 1 Univ.
of Tsukuba and 2 RIST, Japan

16A-8-4
10:30
Single Reaction Control in Atomic
Layer Etching for LSI Device
Fabricatrion (Invited)

Y.-J. Lee, Natl. Nano Device Labs.,
Taiwan16D-8-3
9:50
Multi-Optical
Analyseson
Implanted Si and Embedded
SiGe Ultra Shallow Junction: theEvolution of Structure andChemical State within 10 nm via
Annealing
Y. Chen, Z.-Z. Wu, F.-Y. Lee, F.-M.
Chang and K.-Y. Lo, Natl. Cheng
Kung Univ., Taiwan

16C-8-4
10:30
Next Breakthroughs in Pluripotent
Stem Cell Applications (Invited)
K. Tomoda Osaka Medical College,Japan

16D-8-4
10:10
Effectof
AdditivesforPreparation of Vertical Holes in
Si Substrate Using MetalAssisted Chemical Etching
R. Niwa, T. Shimizu, T. Ito and S.
Shingubara, Kansai Univ., Japan

Author's Interview: 12:05-12:15

Author's Interview: none

Author's Interview: 11:50-12:00

Room P2 (Park Plaza BC (B2F))
Coffee BreakRoom A (Park Plaza D (B2F)
16A-9: Nanoimprint, HybridNIL, Biomimetics, andFunctional Surfaces I

Room B (Park Plaza A (B2F)
16B-9: Nanocarbons III

Room C (The Terrace Room (1F))
16C-9: BioMEMS, Lab on a
Chip, and Nanobiotechnology I

Room D (Emina (1F))
16D-9: Nanofabrication II

Chairs:A. Miyauchi (Tokyo Medical and
Dental Univ.)
J. Taniguchi (Tokyo Univ. of Sci.)

Chairs:M. Tanemura (Nagoya Inst. ofTechnol.)
K. Yanagi (Tokyo Metropolitan Univ.)

Chairs:A. Matsumoto (Tokyo Medical and
Dental Univ.)

Chairs:T. Shimizu (Kansai Univ.)
T. Kawashima (Tohoku Univ.)

16A-9-1
11;15
Nanoimprint
Oxides via(Invited)

16B-9-1
10:45
Field Emission Properties ofGraphene Edges: The Edge
Shape and Functionalization

16C-9-1
11:15(Invited)

16D-9-1
10:50
Pillar Patterning of Silicon / III-V
Vertical Nanowire FET for 7nm
Node and beyond

Lithographyof
Better Chemistry

M.S.M. Saifullah, A*STAR, Singapore

K. Kimura, Kobe Univ., Japan

Y. Gao and S. Okada, Univ. of
Tsukuba, Japan- 10 -

BT. Chan 1, Z. Tao 1, E. Altamirano 1,
A. Veloso 1, A. Singh 2 and J.-F. deMarneffe 1, 1 imec and 2 K.U.
Leuven, Belgium

MNC 2018, November 13-16, 2018, Sapporo Park Hotel, Sapporo, Japan
16A-9-2
11:45
Realization of Butterfly Colours by
Imprinting of Undercut Features
I. Prinz 1, A. Prinz 1, A. Moharana 2,
H. Außerhuber 2, H. Wanzenboeck 4,
S. Ruttloff 3, D. Nees 3, M.R.
Belegratis 3, P. Schaeffner 3 and M.
Muehlberger
2,
1
STRATEC
Consumables, 2 PROFACTOR, 3
JOANNEUM
RES.
Forschungsgesellschaft and 4 Vienna
Technical Univ., Austria

16B-9-2
11:05
A Flexible and Highly Sensitive
Tactile Sensor with CB/CNT
Composite Film
Y.-S. Lin, Y.-Y. Chen, Y.-F. Huang andY.-C. Tsai, Natl. Chung Hsing Univ.,
Taiwan

16A-9-3
12:05
High Volume Semiconductor
Manufacturing Using Nanoimprint
Lithography

16B-9-3
11:25
NaCl-Assisted CVD Synthesis of
MoS2 and Its Application for
Phototransistors

A. Yabuki 1, Z. Hamaya 1, J. Seki 1, T.
Asano 1, K. Sakai 1, A. Aghili 2 , M.
Mizuno 2, J. Choi 2 and C. Jones 2, 1
Canon, Japan and 2 Canon
Nanotechnologies, USA

A. Ando, M. Okada, T. Mori and T.
Irisawa, AIST, Japan

16C-9-2
11:45
Optically Driven Nano-Robots andChemical IC Chip for Micro-RNA
Detection and Tissue Enginneing
Based
on
3D
Micro/NanoFabrication (Invited)
K. Ikuta, Univ. of Tokyo, Japan

16D-9-2
11:10
Fabrication of InAs Quantum
Dots on SiOx Films by Molecular
Beam Deposition
A. Makaino, Y. Tanaka andK.Yamaguchi, Univ. of ElectroComm., Japan

16D-9-3
11:30
Ultra-Fine H-ELGP
Nanogap Electrodes

Pt-Based

Y.Y. Choi, A. Kwon and Y. Majima,
Tokyo Inst. of Technol., Japan

16B-9-4
11:45
Room
Temperature
ValleyPolarized Light-Emitting Diodesof Monolayer Transition Metal
Dichalcogenides
J. Pu 1, W. Zhang 2, Y. Kobayashi 3,
Y. Takaguchi 3, Y. Miyata 3, K.
Matsuda 2, Y. Miyauchi 2 and T.
Takenobu 1, 1 Nagoya Univ., 2 Kyoto
Univ. and 3 Tokyo Metropolitan Univ.,
Japan

Author's Interview: 12:25-12:35

Author's Interview: 12:05-12:15

Room A (Park Plaza D (B2F)
16A-10: Nanoimprint, HybridNIL, Biomimetics, andFunctional Surfaces II

Room B (Park Plaza A (B2F)
16B-10: Nanocarbons IV

Author's Interview: none

Author's Interview: 11:50-12:00

Lunch
Room C (The Terrace Room (1F))
16C-10: BioMEMS, Lab on a
Chip, and Nanobiotechnology II

Chair:
Y. Shimazaki (Hitachi)
K. Suzuki (AIST)

Chairs:A. Ando (AIST)
K. Yanagi (Tokyo Metropolitan Univ.)

16A-10-1
13:50
Biomimetics:
EmulationofBiological“Bricolage"forSustainable
Paradigm
Shifttoward Survival in Anthropocene(Invited)

16B-10-1
13:30(Invited)

16C-10-1
13:30
Injection Molding of Micro andNanostructures for Diagnostic
Applications

S.C. Jun, Yonsei Univ., Korea

I. Prinz 1, A. Prinz 1, G. Hawa 2, L.
Sonnleitner 2, A. Missbichler 2, G.
Bauer 1, C. Mauracher 1, 1 STRATEC
Consumables and 2 Fianostics, Austria

M. Shimomura, Chitose Inst. of Sci.
and Technol., Japan

16A-10-2
14:20
Improvement of Efficiency ofWater-Splitting Photoanode by
3D Au/SnO2/BiVO4 Micro-Cone
Structure
S. Ju, J. Jun, P.-H. Jung, S. Son, J.
Park, M. Byun, J.-H. Jung and H. Lee,
Korea Univ., Korea

16A-10-3
14:40
Increase of a Liquid Rising
Velocity of Biomimetic Microfine
Structures
by
Sequence
Regulations
T. Yaeo, T. Kashima, K. Muto, K. Kawai
and D. Ishii, Nagoya Inst. of Technol.,Japan

16A-10-4
15:00
Fabrication Technique of a
Hydrophobicity
3D
HybridStructure Using UV-Curable EB
ResistK. Goto, T. Okabe and J. Taniguchi,
Tokyo Univ. of Sci., Japan

Chairs:A. Matsumoto (Tokyo Medical and
Dental Univ.)
T. Hayashi (Tokyo Inst. of Technol.)

16B-10-2
14:00
EffectofPersistent
Photoconductivity
on
MoS2
Mechanical Resonator
T. Inoue 1, T. Saito 2, K. Takei 1 T. Arie
1, Y. Miyata 2 and S. Akita 1, 1 Osaka
Pref. Univ. and 2 Tokyo Metropolitan
Univ., Japan

16B-10-3
14:20
Electronic Structure of Thin Filmsof Hydrocarbon Molecules under
an External Electric Field
M. Matsubara and S. Okada, Univ. of
Tsukuba, Japan

16B-10-4
14:40
Topological
Quadrupoles

DipolesandF. Liu and K. Wakabayashi, Kwansei
Gakuin Univ., Japan

16C-10-2
13:50
A Wireless Powered Smart SoftContact Lens for Bioapplications
T. Takamatsu, L. Chen and T. Miyake,Waseda Univ., Japan

Room D (Emina (1F))
16D:10: Nanofabrication III
Chairs:T. Hasegawa (Waseda Univ.)
H. Tanaka (Kyushu Inst. of Technol.)

16D-10-1
13:40
Cu-Based Three-Dimensional
Microfabrication
Using
Femtosecond Laser PulseInduced Reduction of Cu2O
Nanospheres
M. Mizoshiri 1, Y. Kondo 2 and A.
Tanokuchi 1, 1 Nagaoka Univ. and 2
Nagoya Univ., Japan

16D-10-2
14:00
Fabricationof
Fe3O4
Nanostructures and Investigationof Relationship between Diameterand Coercivity of Nanoparticles
R. Akutsu 1, Y. Hara 2, R. Niwa 3, K.
Yoshikawa 3, T. Shimizu 3, S.
Shingubara 3, K. Sugawa 1, T.
Toyama 1 and K. Takase 1, 1Nihon
Univ, 2 Natl. Inst. of Technol. Ibaraki
Colle and 3 Kansai Univ., Japan

16C-10-3
14:10
Fabrication of Protein Microarrayby Combination of SortaseMediated Peptide Ligation andMicrointaglio Printing

16D-10-3
14:20
Microstructure and Electrical
Properties of HfO2 Thin Films
Using La(NO3)3·6H2O Solution
As an Oxidant

Y. Shirakata 1, R. Wakai 1, S. Ueno 1,2
and T. Ichiki 1,2, 1 Univ. of Tokyo and 2
iCONM, Japan

S.Y. Kim, Y.C. Jung, S. Seong, T. Lee,
I.-S. Park and J. Ahn, Hanyang Univ.,
Korea

16C-10-4
14:30
Development of Immuno-Wall
Device for Biomarker Detection in
Clinical Diagnosis

16D-10-4
14:40
Fabrication and Evaluation ofMulti-Walled Carbon Nanotube
Polymer
Actuator
Using
Electrospinning Method

K. Nishiyama 1, T. Kasama 2,3 M.
Maeki 1, A. Ishida 1, H. Tani 1, and M.
Tokeshi 1,3, 1 Hokkaido Univ., 2 Univ.
of Tokyo and 3 Nagoya Univ., Japan- 11 -

K. Kida, H. Kato, K. Sato and M.
Kushida, Chiba Univ., JapanMNC 2018, November 13-16, 2018, Sapporo Park Hotel, Sapporo, Japan
16B-10-5
15:00
Charge Transfer Interaction in
CuI and MoS2 Layer p-n
Heterojunction
R.D. Mahyavanshi, P. Desai, A.K.
Ranade and M. Tanemura and G.
Kalita, Nagoya Inst. of Technol.,Japan

Author's Interview: 15:20-15:30

16C-10-5
14:50
PDMS Replica Leaf Surfaces forPhyllosphere Microbiology
R. Soffe, M. Bernach, N. Altenhuber, M.
Remus-Emsermann and V. Nock, Univ.
of Canterbury, New Zealand

Author's Interview: 15:20-15:30

Author's Interview: 15:10-15:20

Author's Interview: 15:00-15:10

Room P2 (Park Plaza BC (B2F)
Coffee Break

Poster Session II (15:30-17:30, Nov. 16)
Nanocarbons
16P-11-1
pH-Sensible Carbon Dot CoatedSurface for Evaluation of
Antifouling
Activity-Based
Fluorescence ON/OFF
P.T.M. Phuong and S.Y. Park, Korea
Natl. Univ. of Transportation, Korea

Chair: K. Yanagi (Tokyo Metropolitan Univ.)

16P-11-2
PreparationofFluorescent
Polymer
Dot
from
The
Carbonized of MnO2 Nanosheets
Encapsulated Hyaluronic Acid for
Smart
Redox-Responsive
Release of Paclitaxel
B. Ryplida and S.Y. Park, Korea Natl.
Univ. of Transportation, Korea

16P-11-3
Observation of the Interaction
between Avidin and Iminobiotin
Using Graphene FET on SiC
Substrate

16P-11-4
Vertically Aligned Single-Walled
Carbon Nanotube Growth from IrCatalysts by Alcohol Gas Source
MethodY. Taniguchi, T. Miki, Y. Ohno, M.
Nagase, Y. Arakawa, and M.
Yasuzawa, Tokushima Univ., JapanT. Okada, K.P. Sharma, T. Saida, S.
Naritsuka and T. Maruyama, Meijo
Univ., Japan

16P-11-7
Carbon Nanotube-Based Strain
Sensor for Structural Health
Monitoring

16P-11-8
Biosensors and Biofuel Cells
Based on Anode with SingleWalled Carbon Nanotube andFlavin Adenine DinucleotideDependent
Glucose
Dehydrogenase

16P-11-5
Comparative Study of Direct andMediated Electron Transfer in
Biosensors with Flavin Adenine
Dinucleotide
Glucose
Dehydrogenase

16P-11-6
Electrochemical Determination ofIndividual Catechins in Green
Tea with Electrode Fabricated byLong-Length Carbon Nanotube
Dispersed Solution

K. Ishida 1, A. Suzuki 1, K. Orihara 1,2,
H. Muguruma, 1,2, H. Iwasa 2, A.
Hiratsuka 2, K. Tsuji 3 and T. Kishimoto
3, 1 Shibaura Inst. of Technol., 2 AIST
and 3 TOYOBO, Japan

S. Murakami 1, S. Takahashi 1, H.
Muguruma 1, N. Osakabe 1, H. Inoue2, and T. Ohsawa 2, 1 Shibaura Inst.
of Technol. and 2 Nippon Shizai,Japan

16P-11-9
Energetics of Water Migration
through
Unstitched
Grain
Boundaries of Graphene

16P-11-10
Topological Edge States Inducedby Zak’s Phase in A3B
Monolayers

16P-11-11
The Nanoporous and Flat
Substrate Effect for Graphene
Humidity Sensors

K. Yasuraoka, M. Maruyama and S.
Okada, Univ. of Tsukuba, Japan

T. Kameda, F. Liu and K.
Wakabayashi, Kwansei Gakuin Univ.,
Japan

Y.-T. Huang 1, Y.-Y. Chen 1, C.-C.
Huang 2, C.-Y. Su 2 and Y.-C. Tsai 1, 1
Natl. Chung Hsing Univ. and 2 Natl.
Central Univ., Taiwan

J.Y. Lee 1,2, J.K. Kim 1,2, S.H. Kong 1
and D. Jung 2, Kyungpook Natl. Univ.
and 2 KITECH, Korea

K. Orihara 1,2, H. Muguruma 1,2, H.
Iwasa 2, A. Hiratsuka 1,2 and H.
Uzawa 2, 1 Shibaura Inst. of Technol.
and 2 AIST, Japan

16P-11-12
Synthesis of Graphene and Its
Application for Solar Cells
X. Jin, N. Ye, Y. Kong, T. Liang and M.
Xu, Zhejiang Univ., China

16P-11-13
Mechanical
Properties
ofGraphene Nanoribbons under the
Structural Modulations
K. Yoneyama 1, A. Yamanaka 2 and S.
Okada 1, 1 Univ. of Tsukuba and 2
RIST, Japan

Nanodevices
16P-11-14
Carrier Polarity Control of MoTe2
Crystal by Laser Irradiation andDevice Application
K. Kamiya 1, H. Ouchi 1, K. Sakanashi
1, K. Ueno 2, P. Krüger 1, K. Miyamoto
1, T. Omatsu 1 J.P. Bird 1,3 and N.
Aoki 1, 1 Chiba Univ. and 2 Saitama
Univ., Japan and 3 SUNY Buffalo,USA

16P-11-18
Metal/Insulator
Multilayered
Thermally Conductive Films
M. Xu 1, T. Zhan 1 ,R. Yamato 1, H.
Takezawa 1, K. Mesaki 1, M. Tomita 1,
Y. Xu 2 and T. Watanabe 1, 1 Waseda
Univ. and 2 NIMS, Japan

Chair: S. Hara (Hokkaido Univ.)

16P-11-15
Comparative Performance of
GaInNAs/GaAs Multi Quantum
Well Photodetector for 1.0μm
Wavelength
M.S. Nordin 1, A.R. Mohmad 2, A.
Boland-Thoms 1, K.A. Mohamad 3, A.
Alias 3, M. Othman 4 and A.J. Vickers
1, 1 Univ. of Essex, UK, 2 Univ.
Kebangsaan Malaysia, 3 Univ. Tun
Hussein Onn Malaysia and 4 Univ.
Sains Islam Malaysia, Malaysia

16P-11-19 Withdrawn
Fabrication of Lateral Type SpinValves Comprising EpitaxiallyGrown β-FeSi2 Interlayers by
Electron Beam Lithography
H. Ishimoto 1, K. Kudo 1, T. Tabei 2,
K. Sakai 3 and T. Yoshitake 1, 1
Kyushu Univ., 2 Hiroshima Univ. and3 Kurume Col, Japan

16P-11-16
Electric-Field
Optical
DeviceControlling Electron-Spin Polarity
of InGaAs Quantum Dots
H. Chen, J. Takayama, S. Hiura, K.
Sueoka and A. Murayama, Hokkaido
Univ., Japan

16P-11-20
Effect of Oxygen Content on
Ferroelectricity
of
Undoped
Hafnium Oxide
J.-D. Luo 1, H.-X. Zhang 1, Z.-Y. Wang
3, S.-S. Gu 3, H.-T. Chung 1, K.-C.
Chuang 1, C.-Y. Liao 1, W.-S. Li 1, Y.-S.
Li 1, K.-S. Li 2, M.-H. Lee 3 and H.-C.
Cheng 1, 1 Natl. Chiao Tung Univ., 2
NARLabs. and 3 Natl. Taiwan Normal
Univ., Taiwan- 12 -

16P-11-17
Spin
ValvesComprising
Fe3Si/FeSi2/Fe3Si Trilayer Films
K. Sakai 1, Y. Asai 2, K. Ishibashi 2
and T. Yoshitake 2, 1 Kurume Col.
and 2 Kyushu Univ., Japan

16P-11-21
Effective
Dopingof
Semiconductors via Dopant
Containing
Homopolymer
Brushes
M. Perego 1, G. Seguini 1, E. Arduca
1,2, A. Nomellini 1,2, F. Caruso 1,2,
K. Sparnacci 3, D. Antonioli 3, V.
Gianotti 3, M. Laus 3, 1 IMM-CNR, 2
Univ. degli Studi di Milano and 3 Univ.
del Piemonte Orientale, Italy

MNC 2018, November 13-16, 2018, Sapporo Park Hotel, Sapporo, Japan
16P-11-22
Effective Wet Chemical Etchingfor n+-p-n-p+ Thyristor Structures
as Application of Memory Device
J. Yoo, G. Oh, M.-W. Kim, S.-D. Yoo,
T.-H. Shim and E.K. Kim, Hanyang
Univ., Korea

16P-11-23
Coexistenceof
Unipolar
Resistive Switching and Bipolar
Resistive Switching Behaviors in
Pt/NiO/ITO Structure
H.-H. Tang 1, Y.-K. Su 1,2 and T.-J.
Whang, 1 Natl. Cheng Kung Univ. and2 Kun Shan Univ., Taiwan

16P-11-26
A Study on the Effects ofMicroplasma Depending on the
Detection Area of GM-APD

16P-11-27
Vertically Stacked Graphene
Tunnel Junction with Ultrathin
Water Layer Barrier

H. Yoo, B.-T. Lim, J.-W. Park, B.-J.
Lee, W.-S. Sul, Natl. Nanofab Ctr.,
Korea

J. Du, Y. Kimura, M. Tahara, K.
Matsui, H. Teratani, Y. Ohno and M.
Nagase, Tokushima Univ., Japan

Nanofabrication
16P-11-30
Influences of Ti Seed Layers on
the Structure of Self-Organized
Au-Ag Alloy Nanodots on
MgO(001) Substrates

16P-11-31
Investigation of Simple and Easy
Functionalization Method forSingle Conical Pore with a
Polydopamine Layer

16P-11-24
DC
andAC
Electrical
Characteristics of Ta2O5-Based
ReRAM Cells

16P-11-25
Self-Erasable
Antireflection
Films via Nanopatterning on
Shape Memory Polymers

T. Miyatani, Y. Nishi and T. Kimoto,
Kyoto Univ., Japan

Y. Han 1, P. Li 2 and P. Jin 1, 1 Harbin
Inst. of Technol. and 2 Heilongjiang
Univ., China

16P-11-28
Directivity for SOI Photodiode withGold 2D Hole Array Grating

16P-11-29
Immobilization Technology ofHydrolyzed Pt Nanoparticles on
Polyacrylonitrile-Based
Nanofiber Paper

A. Nagarajan 1, S. Hara 1, H. Satoh 1,
A.P. Panchanathan 2 and H. Inokawa 1,
1 Shizuoka Univ. and 2 SRMIST, India

S.Y. Kwon, D.G. Jung, Y.C. Choi, J.Y.
Lee, S.D. Kim and S.H. Kong, Kyung
Pook Natl. Univ., Korea

Chairs: Y. Liu (AIST) and K. Takase (Nihon Univ.)

16P-11-32
FabricationofGraphitic
Nanostructure
with
Catalytic
Activity From Precursor Polymer
UtilizingHigh
TemperatureElectron Beam Irradiation

16P-11-33
EvaluationofInter-Particle
Distance of Gold Nanoparticles
Dispersed on Silane-Treated
Substrates for Fabrication of
Dithiol-Connected Arrays

A. Idesaki 1, Y. Kanuma 2, S.
Yamamoto 1, M. Sugimoto 1 and T.
Yamaki 1,2, 1 Natl. Inst. for Quantum
and Radiological Sci. and Technol. and2 Gunma Univ., JapanT. Yagai 1, K. Matsumoto 1, M.
Moribayashi 1, M. Moriya 1, H.
Shimada 1, A. Hirano-Iwata 2, F.
Hirose 3 and Y. Mizugaki 1, 1 Univ. ofElectro-Comm., 2 Tohoku Univ. and 3
Yamagata Univ., Japan

M. Kamiko 1, W.-S. Kim 2, T.-H. Kim 2,
T.-W. Um 2 and J.-G, Ha 2, 1 Univ. ofTokyo, Japan and 2 Kwangwoon
Univ., Korea

Y. Horiguchi, T. Goda and Y.
Miyahara, Tokyo Medical and Dental
Univ., Japan

16P-11-34
Optical Strong Coupling ofLocalized
Surface
PlasmonResonance with Q-Bands ofTetraphenyI Porphyrin over an
Entire Visible Region

16P-11-35
Far-Field
Enhancementof
Triplet-Triplet
Annihilation
Upconverted Luminescence in
Solid Thicker Films

16P-11-36
OpticalPropertieproasof
Au(Core)/Cu2O(Shell)-Type
Nanospheres As a Photothermal
Therapy Agent

16P-11-37
Surface-Enhanced
Raman
Scattering of Rhodamine 6G on
Mie
Resonance-Responsive
Cu2O Particle Assemblies

S. Yoshinari, N. Takeshima, S. Jin, K.
Sugawa and J. Otsuki, Nihon Univ.,Japan

J. Honda, K. Sugawa and J. Otsuki,
Nihon Univ., Japan

M. Danno, W. Inoue, S. Igari, K.
Sugawa and J. Otsuki, Nihon Univ.,
Japan

16P-11-39
Photo-Thermal Processing ofMetal-Oxide Nano-Thin Film
Using Ultra-Violet Laser for
ReRAM Applications

16P-11-40
Investigation of Optical Transitions
for InAs/GaSb Quantum Ring by
Photoreflectance Spectroscopy

16P-11-41
Thermal Oxidation Kinetics ofVertically-Aligned Si Nanowires

N. Takeshima, S. Jin, K. Sugawa andJ. Otsuki, Nihon Univ., Japan

16P-11-38
Thickness Modulated MoS2 Filmfor Transistor-Based pH Sensing
Application
Y. Jang 1, Y. Jeong 1,2, Y. Wakayama
2 and J.-S. Bae 1, 1 Korea Basic Sci.
Inst., and 2 NIMS, Japan

C.J. Park, C. Lee, S. Shin, M. Kim and
M.W. Shin, Yonsei Univ., Korea

M.G. So 1, J.S. Kim 1, V. Dahiya 2, S.
Krishna 2, M. Zamiri 3, J.O. Kim 4, S.J.
Lee 4 and Y. Kim 5, 1 Yeungnam Univ.,,
Korea, 2 Ohio State Univ., 3 Univ. of
Wisconsin-Madison, USA, 4 Korea
Res. Inst. of Standards and Sci. and 5
Dankook Univ., Korea

S.R. Chang, C.H. Lo and S.L. Cheng,
Natl. Central Univ., Taiwan

16P-11-42
Electron Paramagnetic Resonance
Spectra of Polyethylene with
GraftedPhthalocyanineandNanoparticles

16P-11-43
Microfabrication of Si-Based
Concave Micromirror Array for
Microbial Cell Trapping by XeF2
Vapor Etching

16P-11-44
EnlargementofNeutronAbsorption Grating Area in theProcess of Oblique Gadolinium
Evaporation

16P-11-45
Removing Process of the ThreeDimension
Periodic
Nanostructure Fabricated fromKMPR Photoresist

A. Reznickova 1, L. Grulich 1, E.
Cizmar 2, M. Orendac 2, A.
Zelenakova 2, Z. Kolska 3, F. Prusa 1
and V. Svorcik 1, 1 UCT Prague,
Czech, 2 P.J. Safarik Univ. and 3 J.E.
Purkyne Univ., Czech

A. Matsutani, M. Sato, K. Hasebe and
A. Takada, Tokyo Inst. of Technol.,Japan

T. Samoto, H. Takano and A. Momose,Tohoku Univ., Japan

X.D.F. Wang, Y. Ishikawa, M.
Uenuma and Y. Uraoka, NAIST,Japan

16P-11-46
Surface-Enhanced
Raman
ScatteringofBioorthogonal
Reporter on Gold and Silver
Nanostructures

16P-11-47
Expansion of Driving Wavelengthof Photothermal Conversion ofGold
Nanosphere
Using
Upconverted
Fluorescence
Basedon
Triplet-Triplet
Annihilation

16P-11-48
Metal-Enhanced
Fluorescence
Based on Gold Nanoparticle
Assemblies: Nanoparticle Size
Dependence on Fluorescence
Enhancement

A. Suzuki, S. Yoshinari, K. Sugawa
and J. Otsuki, Nihon Univ., Japan

S. Jin, N. Takeshima, K. Sugawa, J.
Otsuki, Nihon Univ., Japan

Inorganic Nanomaterials
16P-11-49
Effects of Defects, Strains, andStrain Fluctuations on theElectrical Properties of CVDGrown Monolayer Graphene
Films
H. Rho 1, T. Lee 1 and M.J. Kim 2, 1
Chonbuk Natl. Univ. and 2 KIST, Korea

S. Igari, K. Sugawa and J. Otsuki,
Nihon Univ., Japan
Chair: M. Suzuki (AIST)

16P-11-50
Chlorpyrifos Organophosphate
Detection Based on Magnetic
Molecularly Imprinted Polymers
K. Chattrairat and D. Phromyothin,
King Mongkut Inst. of Technol.
Ladkrabang, Thailand

16P-11-51
Study
on
the
Formation
Mechanism of Bismuth-MediatedGe Nanodots Fabricated by
Vacuum Evaporation
K. Tsushima 1, K. Takita 1, H.
Nakazawa 1, T. Tawara 2, K. Tateno 2,
G. Zhang 2, H. Gotoh 2 and H.
Okamoto 1, 1 Hirosaki Univ. and 2
NTT, Japan- 13 -

16P-11-52
Electrochemical Analysis ofCypermethrin
Using
Gold
Printed Circuit Board Electrode
ModifiedwithPoly(Methyl
Methacrylate)
P. Leepheng and D. Phromyothin,
King Mongkut Inst. of Technol.
Ladkrabang, Thailand

MNC 2018, November 13-16, 2018, Sapporo Park Hotel, Sapporo, Japan
16P-11-53
FabricationofGold
Nanostructures Heterogeneously
Grown on Micro Glass Bead
N. Sekimoto, Y. Bando, S. Yanagiya
and A. Furube, Tokushima Univ.,
Japan

16P-11-57
Correlation between Surface
Nano Triangle Pattern Featuresand Ferromagnetism in (In, Si)Codoped ZnO Memory Device
S.-S. Li 1 and Y.-K. Su 1,2, 1 Natl.
Cheng Kung Univ. and 2 Kun Shan
Univ., Taiwan

16P-11-61
Effect of Substrate Self-Bias andNitrogen Flow Rate on Non-PolarAIN Film Growth by Reactive
Sputtering
K. Tatejima 1,2, T. Nagata 2, K.
Ishibashi 2,3, K. Takahashi 2,3, S.
Suzuki 2,3, A. Ogura 1 and T. Chikyow
2, 1 Meiji Univ., 2 NIMS and 3 COMET,Japan

16P-11-54
Atomistic
SimulationofThermoelectric Properties ofHigh-Entropy
Alloy
Nanostructures

16P-11-55
Magnetic and Dielectric Propertiesof CuBO2 Delafossite Oxide
S. Traiphop, P. Thongbai and T.
Kamwanna, Khon Kaen Univ., Thailand

K. Nakamura 1,2, 1 Kyoto Univ.,
Japan and 2 Egypt-Japan Univ. of Sci.
and Technol., Egypt

16P-11-58
Excitonic
LuminescenceofComb-Like ZnO Grown by Vapor
Transport
M.-A. Wu, W.S. Yeoh, C.-H. Liao, D.Y. Chiu, W.-L. Yeh, D. Yuan and Y.-L.
Huang, Natl. Dong Hwa Univ., Taiwan

16P-11-62
Solution- Processed Nickel Oxide
Nanoparticles
forResistive
Memory Devices
C.-Y. Tai 1,2, W.-S. Yeh 1,2, C.-C.
Yang 1,2 and Y.-K. Su 1,2, 1 Natl.
Cheng Kung Univ. and 2 Kun Shan
Univ., Taiwan

16P-11-56
Oxide
Ion
and
ProtonConduction Controlled in NanoGrained Yttria Stabilized ZrO2Thin Films Prepared by Pulse
Laser Deposition
D. Etoh 1,2, T. Tsuchiya 1,2, M.
Takayanagi 1,2, T. Higuchi 2 and K.
Terabe 1, 1 NIMS and 2 Tokyo Univ.
of Sci., Japan

16P-11-59
Controlling
Thermoelectric
Properties of Nanocomposite Thin
Films with Bi2Te3 Nanoplates and
SWCNT
Y. Hosokawa, N. Nakazato, K. Tomita
and M. Takashiri, Tokai Univ., Japan

16P-11-60
Fabricationof
SliverNanoparticles Coated Wetlace
Nonwoven Fabric Based on
Amino-TerminatedHyperbranched Polymer
G. Zhang, D. wang, X. Huang and S.
Wu, Nantong Univ., China

16P-11-63
Sulfidation Reaction-Dependent
StructureandPhotocatalytic
Performanceof
ZnO-ZnS
Nanorods

16P-11-64
Temperature Dependence ofInterdot Spin Dynamics in
Laterally
CoupledInGaAsQuantum Dots

Y.C. Liang and C.C. Wang, Natl. Taiwan
Ocean Univ. Taiwan

S. Sato, S. Hiura, J. Takayama and A.
Murayama, Hokkaido Univ., Japan

16P-11-65
Perpendicular
Magnetic
Properties of Magneto-Optical
Cavity Effect on [CoPt/AZO]
Multilayered Films
H. Yamane 1, K. Takeda 2, Y. Isaji 2, Y.
Yasukawa 2 and M. Kobayashi 2, 1
Akita Industrial Technol. and 2 Chiba
Inst. of Technol., Japan

Nanoimprint, Hybrid-NIL, Biomimetics, and Functional Surfaces
16P-11-66
16P-11-67
Effect of Bumps on The Stability of Drug-Coating on Bioabsorbable
Water Droplets on The Pillar Stent for Eluting in Carotid Artery
Surface
Disease Applications
Y. Shimazaki 1 and A. Miyauchi 2, 1
Hitachi and 2 Tokyo Medical and
Dental Univ., Japan

J. Kim 1, S.A. Park 2, J. Kim 2 and J.
Lee 1, 1 KIMM and 2 Chungnam Natl.
Hospital, Korea

16P-11-70
Surface Modification of Polyimide
Laser-Drilled
Screen-Printing
Masks for Low-Viscosity Liquids
in Print-and-Imprint Method

16P-11-71
Electrical Properties of In2O3 andin-Sn-O Films Prepared by Direct
Nanoimprinting

T. Nakamura, N. Endo and M.
Nakagawa, Tohoku Univ., Japan

16P-11-74
Wafer Level Nanoimprinting with
Precise Control on Contact Forceand Mold Deformation
J.-L. Chang and Y.-C. Lee, Natl.
Cheng Kung Univ., Taiwan

16P-11-78
FabricationofAntireflection
Structure on The Aspheric Lens
by Using UV-Curable InorganicOrganic Hybrid Polymer
I. Mano and J. Taniguchi, Tokyo Univ.
of Sci., Japan

Chair: N. Sakai (Samsung R&D Inst. Japan)

16P-11-68
Dynamic Characteristics of MicroDroplets on Inclined Surfaces with
Arrayed Micro-Pillars to Transport
Droplets in Microfluidics Devices

16P-11-69
Pattern Printing Represented by
Structural Colors
M. Yoshimura, Y. Oda and M.
Kawashita, Toppan Printing, Japan

S. Oshima, R. Sakuma, Y. Nagashima,
R. Sugiyama, Y. Hayasaka, and S. Imai,
Nihon Univ., Japan

16P-11-72
Morphological
Changesin
Positive-Tone EB Resist Patterns
Induced by Sequential Infiltration
Synthesis and Solvent Annealing

16P-11-73
Fabrication of Radio-Frequency
Identification Antenna Patterns
on an IC Chip by Ultraviolet
Nanoimprint Lithography

Y. Ozaki, S. Ito, T. Nakamura and M.
Nakagawa, Tohoku Univ., Japan

K. Suzuki 1, Y. Kurashima 1, S.-W.
Youn 1, H. Takagi 1, H. Hiroshima 1,
K. Ohshima 2 and H. Kobayashi 2, 1
AIST and 2 SK-Electronics, Japan

16P-11-75'Invisible''
Nanostructuring
ProvidesAntifoulinginUnderwater
Windows:aBioinspired Approach

16P-11-76
Computational Study of Tribological
Phenomena at Interfaces between
Polymers and Substrates with
Atomic-scale Roughness

16P-11-77
Relationship between Pattern
Shape and Molecular Behaviors
in Nanoimprint Lithography:
Molecular Dynamics Study

N. Akhtar and B. Holst, Univ. ofBergen, Norway

K. Tada 1, Y. Miyashita 1, S. Takahata
1, M. Yasuda 2, Y. Hirai 2, 1 Natl. Inst.
of Technol., Toyama College and 2
Osaka Pref. Univ., Japan

R. Sakata, H. Kawata, Y. Hirai and M.
Yasuda, Osaka Pref. Univ., JapanP. Jain, K. Haga and E. Tokumitsu,
JAIST, Japan

16P-11-79
Study of Metamaterials Using
Biomimetic Technology
T. Nishino 1, H. Tanigawa 1, H.
Mayama 2 and A. Sekiguchi 3, 1
Ritsumeikan Univ. and 2 Asahikawa
Medical Univ. and 3 Litho Tech Japan,
Japan

BioMEMS, Lab on a Chip, and Nanobiotechnology
Chairs: A. Miura (Hokkaido Univ.) and R. Tero (Toyohashi Univ. of Technol.)
16P-11-80
16P-11-81
16P-11-82
16P-11-83
Prototyping of Flexible and Non-Uniform
Dynamics
of InfluenceofAnnealing Super-Nernstian Sensitivity of
Biocompatible Enzymatic Biofuel Nanoparticle Clusters at a Solid- Temperature on the Structural and CeTiO3 Sensing Films for pH
Cell Using Gel Electrode with Liquid Interface by Laser Sensing Characteristics of Sol-Gel Detection
Conductive Layers Formed by Trapping
Derived Y2O3 Sensing Membrane C.-H. Lin 1, J.-L. Her 1 and K.
Electrolytic Polymerization
I. Hanasaki 1 and C. Hosokawa, 1 for pH Detection
Koyama 2 and T.-M. Pan 1, 1 Chang
T. Wakebe, K. Nakajima, T. Doi, T.
Ogino, and S. Imai, Nihon Univ., JapanTokyo Univ. of Agriculture
Technol. and 2 AIST, JapanandK. Singh, S.P. Bag, P. Garu, B.-S. Lou,
J.-L. Her and T.-M. Pan, Chang Gung
Univ., Taiwan- 14 -

Gung Univ. and 2 Kagoshima Univ.,Japan

MNC 2018, November 13-16, 2018, Sapporo Park Hotel, Sapporo, Japan
16P-11-84
Magnetic
Field-Controllable
Cluster Nanoparticles for Surface
Enhanced Raman Scattering
K. Shibusawa, T. Hase and K.
Tsukada, Keio Univ., Japan

16P-11-88
High Performance pH Sensors
Based on Pyramidal Textured
SiliconC.-Y. Kuo, S.-J. Wang, S.-Y. Wang and
R.-M. Ko, Natl. Cheng Kung Univ.,
Taiwan16P-11-92
Controlling The Orientation of
C2C12 Cells Using Suspended
Microstructured Mesh Substrates
Y. Kibe, K.O. Okeyo and T. Adachi,
Kyoto Univ., Japan

16P-11-85
Microscale Sap Dynamic Sensor
Using Heat Pulse Method
N. Hara, Y. Hara, H. Ishizuka, K.
Terao, H. Takao, and F. Shimokawa,
Kagawa Univ., Japan

16P-11-89
Micro Integration Method forThree-Dimensional Cell Culture
by Using Adhesiveness andDetachability of Thick Photoresist
H. Ueno 1,2, K. Yamada 1 and T.
Suzuki 1, 1 Gunma Univ. and 2 JSPS,Japan

16P-11-93
Excitation
RatiometryofSupported
Lipid
BilayerContaining
Voltage-Sensitive
Dye to Evaluate Sub-StrateInduced Membrane Potentia
Y. Sano and R. Tero, Toyohashi Univ.
of Technol., Japan

16P-11-96
Graphene-Based
EpiduralElectronic Devices for Epilepsy
Electrotherapy
J. Kim 1, S.-W. Park 2, S. Yang 3, S.
Yang 2, J.-H. Ahn 1, 1 Yonsei Univ., 2
Incheon Natl. Univ., Korea and 3 City
Univ. of Hong Kong, Hong Kong

16P-11-97
Micromolding
Processfor
Bioabsorbable Poly L-Lactic Acid
(PLLA)
Using
Polydimethylsiloxane(PDMS)
Replica Mold
H. Takehara 1,2, Y. Kanda 1, Y.
Hadano 1 and T. Ichiki 1,2, 1 Univ. ofTokyo and 2 iCONM, Japan

16P-11-86
Nanostraw Membrane Stamping
for Direct Delivery of Molecules
into Adhesive Cells
Z. Bowen 1, S. Yiming 1, K. Nakazawa
2, T. Miyake 1, 1 Waseda Univ. and 2
Univ. of Kitakyushu, Japan

16P-11-90
Development of Bowl-Shaped
Plasmonic Cavity for Optical
Guiding-Type Biosensor Based on
TemplateofSelf-Assembled
Microspheres
K. Yamada, M. Tamura, Y. Yamamoto,S. Tokonami and T. Iida, Osaka Pref.
Univ., Japan

16P-11-94
Synthesis and Application of
Boronic
Acid-Functionalized
Magnetic
Nanoparticles
forSensing Dopamine Molecules

16P-11-87
Micro/Nano
Particle-Based
Oxygen Sensing Film for
Monitoring Respiration of Cells
Cultured in a Microfluidic Device
Y. Yabuki, J. Yokoyama and K.
Tsukada, Keio Univ., Japan

16P-11-91
Development of High-Density
Microarray-Based
Aptamer
Screening System
A. Jain 1, S. Ueno 1,2, S. Sato 1,2
and T. Ichiki 1,2, 1 Univ. of Tokyo and2 iCONM, Japan

16P-11-95
Plasma-Assisted
Deposition for
Fabrication

Electrospray
Micropattern

J.K. Kook, E.-b. Lim and S.W. Lee,
Gachon Univ., Korea

K. Hashimoto 1, H. Takehara 1,2 andT. Ichiki 1,2, 1 Univ. of Tokyo and 2
iCONM, Japan

16P-11-98
Lipid Bilayer Formation on Ion
Image Sensor and Measurementof Time Response of Ion
Concentration

16P-11-99
Equivalent
Circuit
Model
Modified for Free-Standing
Bilayer Lipid Membranes beyond
1 TΩ

K. Imai, T. Horio, T. Hattori, K. Sawada
and R. Tero, Toyohashi Univ. ofTechnol., Japan

Y. Tomioka 1, S. Takashima 1, M.
Moriya 1, H. Shimada 1, F. Hirose 2,
A. Hirano-Iwata 3 and Y. Mizugaki 1,
1 Univ. of Electro-Comm., 2
Yamagata Univ. and 3 Tohoku Univ.,
Japan

16P-11-100
Electrical Detection of DNA via
Nanoparticles
underLightinduced Assembly
K. Ohashi 1, Y. Yamamoto 1, M.
Tamura 1, Y. Nishimura 2, S. Tokonami
1 and T. Iida 1, 1 Osaka Pref. Univ. and2 Osaka City Univ., Japan- 15 -