MNC 2016, November 8-11, 2016, ANA Crowne Plaza Kyoto, Kyoto, Japan

Tuesday, November 8
Room B (Suzaku 2, 2F)
13:10-17:05 MNC 2016 Technical Seminar in Japanese
Room P (Heian 1, 2F)
17:25-19:25 Get Together Party

Wednesday, November 9
9P-1: Plenary Session
Cnairs: T. Tsuchiya (Kyoto Univ.) and T. Sato (Toshiba)
9P-1-0 9:30-9:50
Opening Remarks: H. Kotera (Kyoto Univ.)
Award Presentation: T. Tsuchiya (Kyoto Univ.) and H. Kotera (Kyoto Univ.), MNC 2015 Outstanding Paper, Most Impressive Presentation,
Most Impressive Poster and Young Author’s Award
Announcement from Committee: M. Suzuki (Kyoto Univ.)
9P-1-1 9:50-10:30
2D Crystals for Smart Life (Plenary)
K. Banerjee, UCSB, USA
Room P (Heian 1,2,3, 2F)
Coffee Break
9P-1-2 10:50-11:30
New Device Application of Organic Semiconductors (Plenary)
S. Lee, Samsung Electronics, Korea
9P-1-3 11:30-12:10
Design Technology CoOptimization, The Key to Unlocking New Scaling Pathways (Plenary)
L. Liebmann, GLOBALFOUNDRIES, USA
Lunch
Room A (Heian 4, 2F)

Room B (Suzaku 2, 2F)

9A-2: Nanocarbon Properties I
K. Matsuda (Kyoto Univ.)
R. Negishi (Osaka Univ.)

9B-2: Organic Nanomaterials
S. Takami (Tohoku Univ.)
H. Kasai (Tohoku Univ.)

9C-2: NanoTool I
R. Kometani (Univ. of Tokyo)
O. Kubo (Osaka Univ.)

9A-2-1
13:30
hBN-encapsulated
Transition
Metal Dichalcogenide van der
Waals
Heterostructures:
Fabrication
andOpticalProperties
M. Okada 1, Y. Kureishi 1, K.
Watanabe 2, T. Taniguchi 2, H.
Shinohara 1 and R. Kitaura 1, 1
Nagoya Univ. and 2 NIMS,
Japan
9A-2-2
13:50
Valley Relaxation in Transition
Metal
Dichalcogenide
Monolayers
S. Konabe, Tokyo Univ. of Sci.,
Japan

9B-2-1
13:30
Protein Engineering for Interface
Designon
Inorganic
Nanomaterials (Invited)
M. Umetsu, Tohoku Univ., Japan

9C-2-1
13:30
Nanoscale
ImagingandFabrication by Focused Ion
Beam System Equipped with
Gas Field Ion Source (Invited)
T. Kozakai, Hitachi High-Tech
Science, Japan

9B-2-2
14:00
Radial Mechanical Property of a
Crossover Density-Varied DNA
Nanotube
Z. Ma 1, S. Park1, N. Yamashita
1, K. Kawai 2, D.N. Kim 3, Y. Hirai
1, T. Tsuchiya 1 and O. Tabata
1,4, 1 Kyoto Univ., 2 Osaka Univ.,
Japan 3 Seoul Natl. Univ., Korea
and 3 Albert-Ludwigs-Univ.,
Germany
9B-2-3
14:20
Hyaluronic
Acid-Activatable
Nanoparticles
forTargeted
Prostate Cancer
Y.H. Lin 1, J.H. Lin 2, W.Y. Hua 3
and J.N. Li 1, 1 China Medical
Univ., 2 Bio-medical Carbon
Technol. and 3 Hung-Kuang
Univ., Taiwan
9B-2-4
14:40
ASF-Coating PEI Nanoparticles
with
Layer
Structurefor
Improved Gene Delivery
Y. Liu, P. Wang, Y. Zhang and
M.Z. Li, Soochow Univ., China

9C-2-2
14:00
Ion Scattering Spectroscopy
Study of ErSi2 Nanowires
Formed on Si(001)
K. Takahashi, O. Kubo, H.
Kagitani, S. Osaka, H. Tabataand M. Katayama, Osaka Univ.,
Japan

9D-2-2
14:00
Plasmon-Induced Photoenergy
Conversion Systems Using
Nano-Engineered Gold Particles(Invited)
H. Misawa 1,2, 1 Hokkaido Univ.,
Japan and 2 Natl. Chiao Tung
Univ., Taiwan

9C-2-3
14:20
Intramolecular Structure Imaging
of Endohedral Metallofullerenes
Using
Frequency-Modulation
Atomic Force Microscopy at
Room Temperature
T. Yamashita, A. Noda, K.
Kobayashi and H. Yamada,Kyoto Univ., Japan
9C-2-4
14:40
Visualizing Three-Dimensional
Adsorption
StructuresofLubricant Molecules on a Hard
Disk by Frequency Modulation
Atomic Force Microscopy
K. Miyazawa 1, N. Nakajima 1,
M. Toyoda 1, R. Sagata 2, T.
Shimizu 2 and T. Fukuma, 1Kanazawa Univ., 2 MORESCO
and 3 ACT-C, Japan

9D-2-3
14:30
Fabrication of High Sensitive
Magnetic Field Sensor with
Amorphous Wire and Fine Pitch
Coils
T. Kato 1, S. Iwata 1 and Y.
Honkura 2, 1 Nagoya Univ. and 2
Magnedesign, Japan

9A-2-3
14:10
Ambipolar Transistors Based on
Random Networks of WS2
Nanotubes
M. Sugahara 1, H. Kawai 1, Y.
Yomogida 1, Y. Maniwa 1, S.
Okada 2 and K. Yanagi 1, 1
Tokyo Metropolitan Univ. and 2
Univ. of Tsukuba, Japan
9A-2-4
14:30
Opening a Gap in Graphene
Encapsulated with hBN
H. Tomori 1,2, K. Nakamura 1, N.
Hoshi 1, Y. Ootsuka 1, K.
Watanabe 3, T. Taniguchi 3 and
A. Kanda 1, 1 Univ. of Tsukuba, 2
JST-PRESTO and 3 NIMS,
Japan

Room C (Suzaku 1, 2F)-1-

Room D (Daigo, 2F)
9D-2: Symp. D: Innovation fromOpen Facilities I
H. Arimoto (AIST)
C. Gorecki (FEMTO-ST)
9D-2-1
13:30
Overview of the Renatech
Network of French Academic
Clean-Rooms (Invited)
M.de Labachelerie, I. Sagnes
and C. Boisard, CNRS, France

9D-2-4
14:50
Tensile Test of a Silicon
Microstructure Fully Coated with
Submicrometer-Thick DLC Film
Using PECVD Method
W. Zhang, A. Uesugi, Y. Hirai, T.
Tsuchiya and O. Tabata, Kyoto
Univ., JapanMNC 2016, November 8-11, 2016, ANA Crowne Plaza Kyoto, Kyoto, Japan
9A-2-5
15:10
Coexistence of Dirac Cones andKagome Flat Bands in Porous
Graphene
M. Maruyama 1, N.T. Cuong 2
and S. Okada 1, 1 Univ. of
Tsukuba and 2 NIMS, Japan
9A-2: Author's Interview:
17:05-17:15

Room A (Heian 4, 2F)

9B-2-5
9C-2-5
15:00
15:00
Improvement of Ionic Liquids Fluorescence Over-Recovery in
Wettability on Oxide Substrates Transient
Response
of
and
in
Situ
High-Speed Bacteriophage T4 DNA with
Ellipsometry Diagnosis of IL YOYO-1 Electrical Stimulation of
Nano Thin Film Deposition
Virtual ElectrodeK. Toyabe, S. Maruyama and Y. T. Hoshino an K. Mabuchi, Univ.
Matsumoto, Tohoku Univ., Japan of Tokyo, Japan
9B-2: Author's Interview:
9C-2: Author's Interview:
15:20-15:30
16:55-17:05
Room P (Heian 1,2,3, 2F)
Coffee BreakRoom B (Suzaku 2, 2F)
Room C (Suzaku 1, 2F)

9A-3: Nanocarbon Growth
M. Katagiri (Toshiba)
M. Takamura (NTT)

9B-3: Electron and Ion BeamTechnologies
H. Yamashita (NuflareTechnol.)J. Yamamoto (Hitachi)

9C-3: NanoTool II
R. Kometani (Univ. of Tokyo)
T. Hoshino (Univ. of Tokyo)

9A-3-1
15:25
Oxidative Decomposition of
CarbonNanotubes
andExtraction of EncapsulatedMaterials
H. Omachi, M. Yamagishi, M.
Kato, R. Kitaura and H.
Shinohara, Nagoya Univ., Japan

9B-3-1
15:35
An Application of 2-Dimensional
Emitter Source for Multiple
Electron Beam System (Invited)
H.S. Kim, Y.B. Lee, S.W. Choi,
H.W. Kim, D.-W. Kim, S.J. Ahn,
T.S. Oh and Y.-H. Song, Sun
Moon Univ., Korea
9B-3-2
16:05
Effect of Tertiary Electrons inSingleEvent
Time-of-Flight
Rutherford
Backscattering
Spectrometry
S. Abo 1, A. Seidl 2, F. Wakaya 1,
M. Abe 1 and M. Takai 1, 1 Osaka
Univ., Japan and 2 Magdeburgstendal Univ. of Applied Sci.,
Germany
9B-3-3
16:25
Characteristics of Krypton Ion
Emission from a Gas Field
Ionization Source with a Single
Atom Tip
H. Shichi, S. Matsubara and T.
Hashizume, Hitachi, Japan

9C-3-1
15:35
Detection of Charge State ofSingle Molecules Using A GaAsBased Nanowire Enhanced by
Metal-Molecule
Capacitive
Coupling
S. Okamoto, M. Sato, K. Sasaki
and S. Kasai, Hokkaido Univ.,Japan
9C-3-2
15:55
Geometry
DependenceofTemperature
CoefficientofResonant
Frequency
forResonant Thermal Sensors
N. Inomata and T. Ono, Tohoku
Univ., Japan

9A-3-2
15:45
Synthesis of Multi-Layer h-BN
DependentonCatalyst
Thickness by Chemical Vapor
Deposition
D. Kondo 1,2, K. Hayashi 1,2, M.
Kataoka 1, T. Iwai 1 and S. Sato
1,2, 1 Fujitsu Labs. and 2 Fujitsu,Japan
9A-3-3
16:05
Room Temperature Synthesis of
Two-Dimensional Boron Sheets
H. Nishino 1, T. Fujimori 1, A.
Fujino 1, T. Fujita 2, N. Umezawa
3, S. Okada 1, E. Nishibori 1, S.
Ito 1, J. Nakamura 1, H. Hosono 4
and T. Kondo 1,4, 1 Univ. of
Tsukuba, 2 Tohoku Univ., 3 NIMS
and 4 Tokyo Inst. of Technol.,Japan
9A-3-4
16:25
Influenceof
CopperCrystallographic Orientation on
Growth and Etching of Graphene
K.P. Sharma, G. Kalita and M.
Tanemura, Nagoya Inst. ofTechnol., Japan
9A-3-5
16:45
Direct Fabrication of Grapheneon Atomically Flat Diamond (111)
Surface by a Nickel Catalyst
S. Kanada 1, Y. Katagiri 1, M.
Nagai 1, S. Ito 1, T. Matsumoto, T.
Ogura 2, D. Takeuchi 2, S.
Yamasaki 2 N. Tokuda 1 and T.
Inokuma 1, 1 Kanazawa Univ.
and 2 AIST, Japan
9A-3: Author's Interview:
17:05-17:15

9B-3-4
16:45
Electron Beam Sources Using
Semiconductor Photocathodes
for Single-Shot Imaging Electron
Microscope
T. Nishitani, Y. Honda, D. Sato,
M. Tabuchi and H. Amano,
Nagoya Univ., Japan
9B-3-5
17:05
Scanning Electron Microscope
Line-Profile Analysis of LessThan-10-nm Patterns
M. Hatano 1, Y. Nakayama 1, S.
Hotta 1, Y. Momonoi 2, and Z.
Wang 2, 1 Hitachi and 2 Hitachi
High-Technologies, Japan

9C-3-3
16:15
Mechanical Characterization of
VLS-Grown Core-Shell SiC
Nanowires for NanomechanicalSensors
S. Nakata 1, K. Sugano 1, F.
Rossi 2, G. Salyiati 2, A. Lugstein
3 and Y. Isono 1, 1 Kobe Univ.,
Japan, 2 IMEM-CNR Inst., Italy
and 3 Vienna Univ. of Technol.,
Austria
9C-3-4
16:35
Characterization Method ofRelative Raman Enhancement
for Surface Enhanced Raman
Spectroscopy
Using
Gold
Nanoparticle Dimer Array
K. Ikegami, K. Sugano and Y.
Isono, Kobe Univ., Japan

9D-2: Author's Interview:
16:55-17:05

Room D (Daigo, 2F)
9D-2: Symp. D: Innovation fromOpen Facilities II
H. Arimoto (AIST)
M. de Labachelerie (Univ. ofFranchecomte)
9D-3-1
15:25
VerticalComb-Drive
Microscanner with 4x4 Array ofMicromirrors for Phase-Shifting
Mirau
Micro-Interferometry(Invited)
C. Gorecki, FEMTO-ST, France
9D-3-2
15:55
Examples of CMOS-MEMS
Realizations within a FranceJapan Collaboration (Invited)
M. Denoual 1, E. Lebrasseur 2
and Y. Mita 2, 1 Univ. ofNormandie, France and 2 Univ.
of Tokyo, Japan
9D-3-3
16:25
Three-Axis Angular Rate Sensor
by Sputtered Lead-Free KNN
Piezoelectric Films
F. Horikiri, K. Watanabe and K.
Shibata, Sciocs, Japan

9D-3-4
16:45
MEMS-Based Near Infrared
Region (NIR) Spectrometer with
Silicon Prism Structure
S.H. Son 1, S.J. Bang 1, S.Y.
Kwon 1, D.G. Jung 1, W.I. Jang
2 and S.H. Kong 1, 1 Kyungpook
Natl. Univ. and 2 ETRI, Korea

9B-3: Author's Interview:
9C-3: Author's Interview:
9D-3: Author's Interview:
17:25-17:35
16:55-17:05
17:05-17:15
Room A (Heian 4, 2F) and Room P (Heian 1,2,3, 2F)
17:35-19:00 Happy Hour (Sponsored by Technical Exhibitors) 18:00-18:05
Nanotechnology Platform Japan
Room A
18:05-18:10
Quantum Design Japan, Inc. & Swiss Litho AG
17:35-17:40
Happy Hour Remark
18:10-18:15
Korean Physical Society / Organizing Committee of
17:40-17:45
JPK Instruments
the MNC 201717:45-17:50
Photo electron Soul Inc.
17:50-17:55
AGADVANTEST
17:55-18:00
GenISys-2-

MNC 2016, November 8-11, 2016, ANA Crowne Plaza Kyoto, Kyoto, Japan

Thursday, November 10
Room A (Heian 4, 2F)

Room B (Suzaku 2, 2F)

10A-4: Symp. C: Nanosensors
and Their Promises for IoT
Society I
T. Yanagida (Kyushu Univ.)
Y. Hotta (Univ. of Hyogo)
10A-4-1
9:00
Ultra-Low Energy Nano-Scaled
Sensors for IoT Systems(Invited)
K. Uchida, Keio Univ., Japan

10B-4: Nanocarbon PropertiesII
G. Kalita (Nagoya Inst. ofTechnol.)
S. Konabe (Tokyo Univ. of Sci.)
10B-4-1
9:00
Strain-Induced Semiconducting
Electron Transport in Graphene
Field Effect Device
S. Higuchi 1, R. Hiraide 1, T.
Kichikawa 1, Y. Ootuka 1, H.
Tomori 1,2 and A. Kanda 1, 1
Univ. of Tsukuba and 2 JSTPRESTO, Japan
10B-4-2
9:20
Electronic Properties of PCBM
under an External Electric Field
S. Furutani and S. Okada, Univ.
of Tsukuba, Japan

10A-4-2
9:30
Integrated Circuits for Big Dataand Small Sensors (Invited)
T. Kuroda, Keio Univ., Japan

Room C (Suzaku 1, 2F)
10C-4: Nanofabrication I
K. Makihara (Nagoya Univ.)
Y. Liu (AIST)
10C-4-1
9:00
Formation and Characterizationof Elemental 2D Materials
Beyond Graphene (Invited)
Y. Yamada-Takamura, JAIST,Japan

Room D (Daigo, 2F)
10D-4:
Microsystem
Technology & MEMS I
T. Namazu (Aichi Inst. of Technol.)
S. Nagasawa (Shibaura Inst. ofTechnol.)
10D-4-1
9:00
Application on SiC Power
Semiconductors
toEnvironmentally
Friendly
Vehicles (Invited)
T. Nishiwaki, T. Koyama and T.
Ito, Toyota Motor, Japan

10C-4-2
9:30
Experimental Study of Solid
Source Diffusion by Spin on
Dopants and Its Application for
Minimal SOI-CMOS Fabrication
Y.X. Liu, K. Koga, S. Khumpuang,
M. Nagano, T. Matsukawa and S.
Hara, AIST, Japan
10B-4-3
10C-4-3
9:40
9:50
Electrical Tunable Localized Low Temperature Formation of
Si:H/Ge:H
States in Sub-Band of Bilayer Crystalline
Heterostructures by Plasma
Graphene Nanoribbon
J. Sun 1,2, M. Muruganathan 2, Enhanced CVD in Combination
with Ni-NDs Seeding Nucleation
K. Ishibashi 1 and H. Mizuta 2,3, Y. Lu, K. Makihara, D. Takeuchi,
1 RIKEN, 2 JAIST, Japan and 3 M. Ikeda, A. Ohta and S.
Univ. of Southampton, UK
Miyazaki, Nagoya Univ., Japan
10B-4-4
10C-4-4
10:00
10:10
Interaction of Few Lawer MoS2 Fabrication of Sub-20 nm Metal
Electrodes on 2D Materials
and Adsorbed Dopamine
T.T. Nguyen 1,2, T. Komeda 1 without a Charged Particle Beamand A. Ando 2, 1 Tohoku Univ. F. Holzner 1, H. Wolf 2, C.
Rawlings 2, U. Duerig 2, A.W.
and 2 AIST, Japan
Knoll 2, M. Spieser 1, S. Bonanni
1 and P. Paul 1, 1 SwissLighoand 2 IBM Res., Switzerland
10B-4: Author's Interview:
10C-4: Author's Interview:
12:25-12:35
10:30-10:40
Room P (Heian 1,2,3, 2F)
Coffee BreakRoom B (Suzaku 2, 2F)
Room C (Suzaku 1, 2F)

10D-4-2
9:30
A Fully Printed Cantilever for
Additive Manufacturing of Force
Gauge
S. Kanazawa, Y. Kusaka, N.
Yamamoto and H. Ushijima,
AIST, Japan
10D-4-3
9:50
Microfabricated Emitter Arrays
for an Ionic Liquid Electrospray
ThrusterK. Nakagawa 1, T. Tsuchiya 2
and Y. Takao 1, 1 Yokohama
Natl. Univ., 2 Kyoto Univ., Japan

10A-5: Symp. C: Nanosensors
and Their Promises for IoT
Society II
T. Yanagida (Kyushu Univ.)
K. Uchida (Keio Univ.)
10A-5-1
10:45
On-Chip FRET Biosensor Buildon
Graphene-BiomolecularInterface (Invited)
Y. Ueno 1 and K. Furukawa 1,2,
1 NTT and 2 Meisei Univ., Japan

10B-5:
Nanocarbon
Application
A. Ando (AIST)
K. Yanagi (Tokyo Metropolitan
Univ.)
10B-5-1
10:35
Dry Manufacturing of Carbon
Nanotube Thin Films for Flexible
Electronics Applications (Invited)
E.I. Kauppinen, Aalto Univ.
School of Science, Finland

10C-5: Nanofabrication II
K. Takase (Nihon Univ.)
H. Tanaka (Kyushu Inst. ofTechnol.)

10D-5:
Microsystem
Technology & MEMS II
R. Takigawa (Kyushu Univ.)
Y. Tomizawa (Toshiba)

10C-5-1
10:55
Controlling Flake Size andShape of MoS2 Monolayers
Grown by Chemical Vapor
Deposition (Invited)A. Özden, F. Ay, C. Sevik and
N.K. Perkgöz, Anadolu Univ.,
Turkey10A-5-2
11:15
High-Resolution 2D/3D Printing
Techniquesfor
WearableElectronics (Invited)
J.-U. Park, UNIST, Korea

10B-5-2
11:05
Photoinduced
Forceon
Polystyrene
Microsphere
Measured by Carbon Nanotube
Mechanical Resonator
M. Yasuda, K. Takei, T. Arie andS. Akita, Osaka Pref. Univ.,
Japan

10C-5-2
11:25
Extraction of Bandgap inGraphene
Nanoribbon
byAdsorptionofMolecular
Nanoparticle
R.R. Pandey, P. Liu and H.
Tanaka, Kyushu Inst. of Technol.,Japan

10D-5-1
10:45
Young's Modulus Evaluation ofElectroplated Ti/Au Structures for
MEMS Devices
D. Yamane 1,2, T. Konishi 3, T.
Safu 3, H. Nakajima 1,2, M.
Teranishi 1,2, C.-Y. Chen 1,2, T.F.M. Chang 1,2, M. Sone 1,2, H.
Toshiyoshi 2,3, K. Masu 1,2 andK. Machida 2,3, 1 Tokyo Inst. ofTechnol., 2 JST-CREST, 3 NTTAT and 3 Univ. of Tokyo, Japan
10D-5-2
11:05
Electroless Ni Plating of Seed
Film of Electrophoresis of Ag
Nanoparticles
K. Nitta 1, R. Takigawa 1, A.
Ikeda 1, M. Kumazawa 2, T. Hirai2, M. Komatsu 2 and T. Asano 1,
1 Kyushu Univ. and 2 JGC
Catalysts and Chemicals, Japan

10A-4-3
10:00
Macro-Scale,Multi-Sensing
Flexible Devices for Human
Interactive Applications (Invited)
K. Takei, Osaka Pref. Univ.,
Japan

10A-4: Author's Interview:
11:45-11:55

Room A (Heian 4, 2F)-3-

10D-4-4
10:10
SMA Rapid Cooling System
Using Liquid Transport by
Capillary Phenomenon
I. Matsui and S. Nakagawa,Shibaura Inst. of Technol., Japan

10D-4: Author's Interview:
12:05-12:15

Room D (Daigo, 2F)

MNC 2016, November 8-11, 2016, ANA Crowne Plaza Kyoto, Kyoto, Japan
10B-5-3
11:25
Intercalation Doping of MoCl5
into
Low-Temperature-Grown
Multilayer Graphene
M. Katagiri 1, H. Miyazaki 1, R.
Matsumoto 2, T. Matsumoto 3, R.
Ifuku 3, T. Sakai 1 and A. Kajita
1, 1 Toshiba, 2 Tokyo Polytechnic
Univ. and 3 Tokyo Electron,Japan

Room A (Heian 4, 2F)
10A-6: Symp. B: Forefront ofGraphene & Related 2D
Materials
D. Kondo (Fujitsu Labs.)
K. Maehashi (Tokyo Univ. ofAgriculture and Technol. )10A-6-1
14:10
Diamane and Diamond (Invited)(Invited)
R.S. Ruoff, UNIST, Korea

10A-6-2
14:40
Controlling Charge Transport,
Spin
Transport
andSuperconductivity in a TwoDimensional Materials by theElectric Field Effect (Invited)
B. Özyilmaz, National Univ. ofSingapore, Singapore

10A-6-3
15:10
Fundamental Properties andApplications of Two-Dimensional
Materials (Invited)
T. Kondo 1,2, 1 Univ. of Tsukuba
and 2 Tokyo Inst. of Technol.,Japan

10C-5-3
11:45
Rapid Visualization of Latent
Fingerprints Using Gold Seed
Enhancement
C.-C. Yu 1, F.-Y. Cheng 2 and C.H. Su 1, 1 Natl. Yang Ming Univ.
and 2 Natl. Cheng Kung Univ.
and Hospital, Taiwan

10B-5-4
10C-5-4
11:45
12:05
Diffusion of Li Atom from a Dopant Distribution in Nickelided
Solvated State to Interlayer of Si Nanowire Surrounded by SiO2
Graphite through Carbonylic Edge Film Characterized by LaserTermination
for
Fast Assisted
Atom
Probe
Charge/Discharge of Li Ion
Battery:First-Principles Tomography
S. Hashimoto 1, S. Asada 1, T.
Calculations
T. Kawai 1,2, S. Okada 2 and M. Xu 1, S. Oda 1, T. Matsukawa 2
Otani 3, 1 NEC, 2 Univ. of and T. Watanabe 1, 1 Waseda
Univ. and 2 AIST, Japan
Tsukuba and 3 AIST, Japan
10B-5-5
12:05
Modeling and Technology Platform
for Analog High Frequency
Carbon Nanotube Transistors(Invited)
S. Hermann 1,2,3, M. Claus 3,
S.E. Schulz1,2,3, M. Schröter
3,4, 1 TU Chemnitz, 2 ENAS, 3
TU Dresden, Germany and 4 UC
San Diego, USA
10B-5: Author's Interview:
10C-5: Author's Interview:
12:35-12:45
12:25-12:35
Lunch
Room B (Suzaku 2, 2F)
Room C (Suzaku 1, 2F)
10B-6:
Nanomaterials I
M. Osada (NIMS)
M. Suzuki (AIST)

Inorganic

10B-6-1
14:10
Indium Oxide Nanowires as
Efficient Antireflection Layers in
Multicrystalline Silicon Solar
Cells
T.-I. Chin 1, Y. -C. Wang 1, C.-W.
Kuo 2, T.-M. Kuan 2, C.-Y. Yu 2
and I.-C. Chen 1, 1 Natl. Central
Univ. and 2 TSEC, Taiwan
10B-6-2
14:30
Crystallographic Polarity Effect of
ZnO on Electronic State ofPentacene/ZnO
HeteroStructure
T. Nagata 1, T. Nakamura 1,2, R.
Hayakawa 1, T. Yoshimura 2, S.
Oh 1, N. Hiroshiba 1,3, T.
Chikyow 1, N. Fujimura 2 and Y.
Wakayama 1, 1 NIMS, 2 Osaka
Pref. Univ. and 3 Tohoku Univ.,
Japan

10B-6-3
14:50
Facile Synthesis of Mesoporous
ZnCo2O4 Nanoparticles Using
Polyvinyl Pyrrolidone as Growth
Modifier for High-PerformanceSupercapacitor
G.M. Tomboc, H.S. Jadhav andH. Kim, Myongji Univ., Korea

10D-5-3
11:25
Mechanical
Properties
Characterization and Fabrication
Damage Investigation of Silicon
Nanowires Based on FourDifferent Sample Preparation
Techniques
G. Ina 1, T. Fujii 2, T. Kozeki 1, S.
Inoue 1 and T. Namazu 3, 1 Univ.
of Hyogo, 2 Akita Pref. Univ. and3 Aichi Inst. of Technol., Japan
10D-5-4
11:45
ReductionofThermalResistance in Al/Ni-reactivelybonded Solder Joints by
ThickeningtheOutermostLayersS. Kanetsuki 1,2, K. Kuwahara 3,
S. Egawa 3, S. Miyake 4 and T.
Namazu 2, 1 Kobelco Res. Inst.,
2 Aichi Inst. of Technol., 3 Univ.
of Hyogo and 4 Kobe City
College of Technol., Japan

10D-5: Author's Interview:
12:05-12:15
Room D (Daigo, 2F)

10C-6: Nanofabrication III
R. Hasunuma (Tsukuba Univ.)
A. Kohno (Fukuoka Univ.)

10D-6: Nanoimprint, Nanoprint
and Rising Lithography
A. Yokoo (NTT)
H. Lee (Korea Univ.)

10C-6-1
14:10
III-V Nanowires for Solar Celland Energy Applications (Invited)
H.H. Tan, Australian Natl. Univ.,
Australia

10D-6-1
13:40
Enhanced
Light
Extraction
Efficiency in Organic Light
Emitting Diode Using NIL(Invited)
Y.D. Kim, H.-J. Choi, Y.H. Sungand H. Lee, Korea Univ., Korea

10C-6-2
14:40
Evaluation of Titanium-Assisted
Chemical Vapor Etching ofSilicon Dioxide
R. Kometani, T. Murakami and E.
Maeda, Univ. of Tokyo, Japan
10C-6-3
15:00
Heterogeneous Integration of
Vertical InxGa1-xAs Nanowires
on Ge(111) Substrates bySelective-Area MOVPE
A. Yoshida 1, F. Ishizaka 1, K.
Tomioka 1,2 and J. Motohisa 1, 1
Hokkaido Univ. and 2 JSTPRESTO, Japan
10C-6-4
15:20
Nanofabrication of Magnetic
Tunnel Junctions toward Sub-20
nm Φ for Embedded Cache
Memory in High Performance
CPUs
T. Sugii, H. Noshiro, Y. Yamazaki,
C. Yoshida and Y. Iba, Fujitsu,
Japan

10D-6-2
14:10
Direct Imprinting of Liquid Silicon
for Si Fine Patterns
K. Yamazaki, T. Matsuda and T.
Shimoda, JAIST, Japan-4-

10D-6-3
14:30
Novel Computational Study on
Sub-10nm
UV
CuringCharacteristic in Nanoimprint
Lithographyby
Stochastic
Approach
N. Koyama, M. Shirai, H.
Kawata, Y. Hirai and M. Yasuda,
Osaka Pref. Univ., Japan
10D-6-4
14:50
High-resolution
EmbeddedPrinting
Using
Imprinted
Microgrooves for Transparent
Applications
R. Hokai, K. Kurihara, N. Takada,S. Matumoto and H. Hiroshima,
AIST, JapanMNC 2016, November 8-11, 2016, ANA Crowne Plaza Kyoto, Kyoto, Japan
10A-6-4
15:40
Graphene for Field
Emission
Applications (Invited)
W.I. Milne 1,3, C. Li 2, W. Lei 2,
B. Wang 2, G. Duesberg 4, T.
Hallam 4 and M.T. Cole 1, 1
Univ. of Cambridge, UK, 2 SEU,
China, 3 Tokyo Inst. of Technol.,Japan and 4 Trinity College
Dublin, Ireland

10B-6-4
15:10
Superlattice Study of Lanthanum
CuprateNanoparticles
Synthesized via Sol-Gel Process
under Air Pressure
F. Budiman, Y. Horibe, Y. Fusao
and H. Tanaka, Kyushu Inst. ofTechnol., Japan

10C-6-5
15:40
The Design of High Resolution
Low Temperature Polycrystalline
SiliconOpticalFingerprint
Sensor with 100 Nanometer
Thick Absorption Layer
Y.-C. Wei, Y.-C. Li, I.-C. Lee andH.-C. Cheng, Natl. Chiao Tung
Univ., Taiwan

10B-6: Author's Interview:
10C-6: Author's Interview:
15:30-15:40
16:00-16:10
Room P (Heian 1,2,3, 2F)
Coffee Break
Rooom P (Heian, 2F)

10D-6-5
15:10
Viscoelasticity of a Photoresist
Used for Nanoimprint Lithography
Measured Under Confinement in
Nanometer-Sized Gaps
S. Ito 1, K. Takahashi 2, K.
Fukuzawa 1 and H. Zhang 1, 1
Nagoya Univ. and 2 Toyohashi
Univ. of Technol., Japan
10D-6-6
15:30
Nanoimprint
SystemDevelopment and Status for High
VolumeSemiconductor
Manufacturing (Invited)
Y. Kondo 1, N. Nishimura 1, T.
Takashima 1, T. Matsumoto 1, T.
Hayashi 1, A. Kimura 1, K. Emoto
1, J. Choi 2 and P. Schumaker 2,
1 Canon, Japan and 2 Canon
Nanotechnol., USA
10D-6: Author's Interview:
16:00-16:10

10P-7: 16:10-18:10 POSTER SESSION IElectron and Ion Beam Technologies
Chairperson: H. Yamashita (NuflareTechnol.)
10P-7-1
10P-7-2
andProcess
Optimization of Gold Lamellae Progress
Nanostructures as Gas/Liquid Improvements for Multiple EBeam Direct Write
Sensors Based on LSPRs
S. Zhang, Y. Chen, B. Lu, J. Liu, I. Servin 1, M.-L. Pouteau 2, P.
Essomba 1, J. Pradelles 1, L.
J. Shao and C. Xu, Fudan Univ., Lattard 1, P. Brandt 2 and M.
China
Wieland 2, 1 CEA-LETI, France
and 2 MAPPER Lithography, The
Netherlands
10P-7-5
10P-7-6
Surface Potential Distribution of FormationofNano-bumpa Resist Film Irradiated by Structures on Si(100) Surfaces
ElectronBeamunder by Low-Energy Ga Ion Irradiation
Acceleration Bias
S. Suzue, Y. Matsui and J.
M. Tokai, T. Kawamoto and M. Yanagisawa, Univ. of Shiga,
Kotera, Osaka Inst of Technol., Japan
Japan
10P-7-102L
Radial Field Gun Designs for
Focused Multi-Beam Electron
Columns
A. Khursheed and W.K. Ang,
Natl. Univ. of Singapore,
Singapore

10P-7-3
Measurementof
Fogging
Electron Current for Various
Beam Energies at Acceleration
Bias in Scanning Electron
Microscope
Y. Hagiwara, T. Noda and M.
Kotera, Osaka Inst. of Technol.,Japan

10P-7-4
Simulation of Charging Processof PMMA Film on Si Substrateunder Electron Beam Irradiation
A. Fukuzawa and M. Kotera,
Osaka Inst. of Technol., Japan

10P-7-100L
Measurementof
Fogging
Electron Current at a Specimen
Surface in Scanning Electron
Microscope
N. Taku, Y. Hagiwara and M.
Kotera, Osaka Inst. of Technol.,Japan

10P-7-101L
Development of a Simulation of
Fogging Electron Trajectories ina Scanning Electron Microscope
T. Nishino, K. Terada, Y.
Hagiwara, T. Noda and M. Kotera,
Osaka Inst. of Technol., Japan

10P-7-9Growthof
Nitrogen-Doped
GrapheneConstructed
Nanofibers on Nichrome Foil
R. Vishwakarma, G. Kalita and
M. Tanemura, Nagoya Inst. ofTechnol., Japan

10P-7-10
MoS2 Based Back-Gate FETs for
Photodetecters
A. Ando 1, D. Kondo 2 and S.
Sato 2, 1 AIST and 2 FujitsuLabs., Japan

10P-7-13
Novel Tetracationic Ionic Liquids:
Synthesis, Characterization, andApplication as Carbonaceous
Precursors
A.H. Tamboli and H. Kim,
Myongji Univ., Korea

10P-7-14
Superconducting
Proximity
Effect in Graphene/Layered
Superconductor NbSe2 Interface
K. Yarimizu 1, Y. Ootsuka 1, H.
Tomori 1,2, K. Watanabe 3, T.
Taniguchi 3, K. Ueno 4 and A.
Kanda 1, 1 Univ. of Tsukuba, 2
JST-PRESTO, 3 NIMS and 4
Saitama Univ., Japan

10P-7-103L
Early Stages of Development
Process in Electron-Exposed
Resists: A Molecular Dynamics
Study
S. Hitomi, H. Kawata, Y. Hirai and
M. Yasuda, Osaka Pref. Univ.,
Japan

Nanocarbons
Chairperson: S. Okada (Univ. of Tsukuba)
10P-7-7
10P-7-8
Formation of Co Capped Carbon Electrochemical
Studyof
Nanotube in TEM
DopamineatElectrode
M.S. Rosmi 1,2, Y. Yaakob 1,3, M. Fabricated by Long-Length
Ibrahim Araby 1, S. Sharma 1, M. Carbon Nanotube Dispersed
Z. Mohd Yusop 4, G. Kalita 1, M.
Kitazawa 5 and M. Tanemura 1, 1 Solution
Nagoya Inst. of Technol., Japan, 2 Y. Inoue 1, H. Muguruma 1, H.
Univ. Pendidikan Sultan Idris, 3 Inoue 2 and T. Ohsawa 2, 1
Univ. Putra Malaysia, 4 Univ. Shibaura Inst. of Technol. and 2
Technol. Malaysia, Malays and 5 Nippon Shizai, Japan
Olympus, Japan
10P-7-11
10P-7-12
Thermal Response Evaluation of Effects of Pyrene Adsorption
Carbon-Nanotube-Composite
Density as an Anchor Molecules
Paper for ''Thermoelectric Power on Biosensor Response Using
Generation Paper''
Reduced Graphene Oxide Thin
K. Kawata and T. Oya, Film Transistor
Yokohama Natl. Univ., Japan
R. Negishi, Y. Matsui and Y.
Kobayashi, Osaka Univ., Japan-5-

MNC 2016, November 8-11, 2016, ANA Crowne Plaza Kyoto, Kyoto, Japan
10P-7-15
Large Scale Preparation of
Mascroscopic Graphene Fiber
Based on Acidic Condition
Z. Zhang, D. Zhang, H. Lin and Y.
Chen, Soochow Univ., China

10P-7-19
Direct Deposition of Graphene
on GaN by Thermal CVD at Low
Temperatures
K. Aida, T. Enomoto, H. Arai, K.
Yokosawa and K. Ueno,
Shibaura Inst. of Technol., Japan

10P-7-16
Amperometric Biosensor with
Single-Walled Carbon Nanotube
and Flavin Adenine DinucleotideDependent
Glucose
Dehydrogenase
H. Hidaka 1, H. Muguruma 1, H.
Iwasa 2, A. Hiratsuka 2 and H.
Uzawa 2, 1 Shibaura Inst. ofTechnol. and 2 AIST, Japan
10P-7-20
Electronic Structure of Bilayer
Graphene with Defects under anExternal Electric Field
K. Kishimoto and S. Okada, Univ.
of Tsukuba, Japan

10P-7-17
Li Atom Adsorption on Graphenewith Various Defects for LargeCapacity Li Ion Batteries: Firstprinciples Calculations
K. Shiota 1 and T. Kawai 1,2, 1
Univ. of Tsukuba and 2 NEC,Japan

10P-7-18
Numerical Simulation of HighVoltage
Diamond
Schottky
Barrier Diodes
D.-W. Kang 1, H.N. Chang 2 and
M.-W. Ha 2, 1 Cheongju Univ.
and 2 Myongji Univ., Korea

10P-7-104L
Electrochemical
Ion-Storage
Behavior of Organic Molecules
ConfinedinSingle-Walled
Carbon Nanotubes
C. Li, Y. Sakamoto, Y. Ishii and S.
Kawasaki, Nagoya Inst. ofTechnol., Japan

10P-7-105L
Gas Response Characteristics ofGraphene/MoS2 Heterojunction
to NO2
H. Tabata, Y. Sato, O. Kubo and
M. Katayama, Osaka Univ.,
Japan

10P-7-23
Nanofabrication of Polarizers for
InP Based InGaAs Sensor by
Electron Beam Lithography
X. Huang 1, J. Shao 1, R. Wang
2, T. Li 2, X. Shao 2, X. Li 2, H.
Gong 1 and Y. Chen 1, 1 Fudan
Univ. and 2 SITP, China
10P-7-27
Effects of Heater Power and Gas
Medium on the Sesitivity of a
CNT Yarn Inclinometer
D.-W. Jung 1,3, Y.-H. Hwang 1,
J.G. Kim 1, S.Y. Kwon 2, D.G.
Jung 2, S.H. Kong 2 and G.S.
Lee 3, 1 KITECH, 2 Kyungpook
Natl. Univ., Korea and 3 Univ. of
Texas, USA
10P-7-31
Temperature Dependence of the
BiaxialTensileStrainin
Suspended Ge Cross-Shaped
Microstructures
S. Ishida 1, S. Kato 1, K. Oda 2,
S. Iwamoto 1 and Y. Arakawa 1,
1 Univ. of Tokyo and 2 Hitachi,
Japan
10P-7-109L
Dimension Dependent Immunityof X-ray Irradiation on LTPS
TFTs
Y.-C. Wei 1, Y.-C. Li 1, I-C. Lee 2
and H.-C. Cheng 1, 1 Natl. Chiao
Tung Univ. and 2 ITRI, Taiwan

10P-7-24
p-Cu2O/AlOx/n-SiC/n-SiStructured
Nonvolatilepn
Memory Diode with Low
Switching Voltages
M. Tsuchiya, T. Tsukamoto and Y.
Suda, Tokyo Univ. of Agriculture
and Technol., Japan
10P-7-28
StudyofSingle-Electron
Information-Processing Circuit
Mimicking Foraging Behavior of
Honeybee Swarm
T. Tanabe and T. Oya, Yokohama
Natl. Univ., Japan

10P-7-34
Formation of Au Nanoparticle
Arrays on Hydrogel 2-D Patterns
Based on Poly(Vinylpyrrolidone)
S. Tsukuda 1,3, K. Okamoto 2,3,
H. Yamamoto 3, T. Kozawa 3
and T. Omata 1, 1 Tohoku Univ.,
2 Hokkaido Univ. and 3 Osaka
Univ., Japan

10P-7-35
High
AspectRatio
GaN
Nanorods Fabricated by Meansof UV Photolithography and ICP
Etching
M. Ekielski 1, M. Wzorek 1, M.A.
Borysiewicz 1, A. Domanowska
2, T. Wojtowicz 1, A. Piotrowska
1 and E. Kamińska 1, 1 Al.
Lotników and 2 SilesianUniversity of Technol., Poland
10P-7-39
Nanofabrication of Ultra-Tall
SiliconNano-Pillars
byInductively Coupled Plasma Etchwith Hydrogen Silsesquioxane
as Ethcing Mask
X. Li, C. Shuo, J. Shao, L. Bingrui
and Y. Chen, Fudan Univ., China

Nanodevices
Chairperson: Y. Hotta (Univ. of Hyogo)
10P-7-21
10P-7-22
Magneto-Optical Cavity Effect on Effects of Post Metal Annealing
Perpendicular
Magnetic Thermal Budget on Electrical
Multilayers for Hydrogen Gas Characteristics of HfOx-Based
Sensing Application
RRAM Devices
H. Yamane 1, H. Yamasaki 2, K.
Sumiyoshi 2 and K. Shigemura K.-C. Chuang, K.-Y. Lin, J.-D.
2, 1 Akita Industrial Technol. Ctr. Luo, C.-Y. Chu and H.-C. Cheng,
Natl. Chiao Tung Univ., Taiwan
and 2 NLT Technol., Japan
10P-7-25
10P-7-26
Sodium Chloride Concentration Accepter Doping Effect on Rutile
Measurementwith
p-type Type TiO2/Ge Stack Structure by
Doping Nanowire Sensor
Combinatrial Synthesis
C.-C. Hsu 1, Y.-T. Tsai 1, G.-W. Y. Suzuki 1,2, T. Nagata 2,3, Y.
Wu 1, C.-C. Wu 2 and C. -L. Dai Yamashita 2, T. Nabatame 2, A.
3, 1 Yuan Ze Univ., 2 Tamkang Ogura 1 and T. Chikyow 2, 1
Univ. and 3 Natl. Chung Hsing Meiji Univ., 2 NIMS and 3 JSTUniv., Taiwan
PRESTO, Japan
10P-7-29
10P-7-30
Design of Slime-Mold-Inspired Fabrication of Single-Electron
Multi-Layered Single-Electron- Transistor Made of Fe-Dot Film
Circuitand Its Characteristics
K. Satomi and T. Oya, Yokohama S. Honjo, T. Uchida, A.
Natl. Univ., Japan
Tsurumaki-Fukuchi, M. Arita and
Y. Takahashi, Hokkaido Univ.,
Japan
10P-7-107L
10P-7-108L
The Study on the Application of Solution-Based Formation of
Low-Temperature
High Quality Gate Dielectrics on
Polycrystaline-Silicon Thin-Film Graphene Using MicrowaveTransistors in Digital X-ray Image Assisted Annealing
Sensors
K.-S. Kim, G.-H. Park, H.
Y.-C. Wei 1, Y.-C. Li 1 , I-C. Lee 2 Fukidome, T. Suemitsu, T. Otsuji
and H.-C. Cheng 1, 1 Natl. Chiao and M. Suemitsu, Tohoku Univ.,
Tung Univ. and 2 ITRI, Taiwan
Japan

10P-7-106L
Si3N4-Based
RRAM
with
Flexibility of Physical Design
S. Kim 1, S. Jung 1, M.-H. Kim 1,
T. Kim 2, S. Bang 2, S. Cho 2,
and B.-G. Park 1, 1 Seoul Natl.
Univ. and 2 Gachon Univ., Korea
10P-7-110L
Systematic
Analysisof
Passivation andAnnealing
Effects on Degradation ofElectrical Performance of Black
Phosphorus FETs
M.-K. Song 1,2, A.-J. Cho 1,2,
H.-J. Kim 1,2 and J.-Y. Kwon 1,2,
1 Yonsei Univ. and 2 Yonsei Inst.
of Convergence Technol., Korea

Nanofabrication
Chairperson: K. Takase (Nihon Univ.)
10P-7-32
10P-7-33
Fiber-based Micro Temperature Single-cell Isolation of S.
Sensor by Using Three- Cerevisiae
Using
Celluloid
Dimensional Photomask
Microenclosure Array Formed by
Y. Kim 1,2, Y. Zhang 1 and M. the SUMP Method
Hayase 2, 1 AIST and 2 Tokyo A. Matsutani and A. Takada,
Univ. of Sci., JapanTokyo Inst. of Technol., Japan

10P-7-36
Fabrication of Less Reflective
Nanowhisker
on
Textured
Substrates
C.W. Lin and J.W. Wang, Tatung
Univ., Taiwan

10P-7-37
Graphene
Oxide-assisted
Preparation of Polyvinyl Alcohol(PVA) Hybrid Nanofiber byElectrospinning for Biomedical
Application
Z.-C. Chen and T.-L. Chang,Natl. Taiwan Normal Univ.,
Taiwan10P-7-38
A Novel Approach for Reducing
Line Edge Roughness by a
Thermal Radiation Induced
Local Reflow Process
C. Xu, S. Zhang and Y. Chen,
Fudan Univ., China-6-

MNC 2016, November 8-11, 2016, ANA Crowne Plaza Kyoto, Kyoto, Japan
10P-7-40
Cell Adhesion and Proliferation
on Polytetrafluoroethylene with
Plasma-metal and PlasmaMetal-Carbon Interfaces
A. Reznickova, K. Kolarova, Z.
Smejkalova, O. Kvitek and V.
Svorcik, VSCHT, Czech

10P-7-41
Precisive Tuuing of Surface
PlasmonResonance
Wavelength of Anisotropic Silver
Nanoprisms
byRemoving
Surface Protective Agent
S. Igari, R. Miyasaka, S. Jun, K.
Uchida, K. Sugawa, K. Takase
and J. Otsuki, Nihon Univ., Japan

10P-7-42
Gas Barrier Performances of
ALD-Al2O3/ZnO Laminated Films
H. Zama and K. Honda, ULVAC,
Japan

10P-7-111L
Fabrication of Silicon NanoWedge Structure by Anisotropic
Chemical Etch Process Using
TMAH Solutions
M.-H. Kim 1, S. Jung 2 and B.-G.
Park 1, 1 Seoul Natl. Univ. and 2
Samsung Electronics, Korea

10P-7-44
Physically-Synthesized Porous
Gold Nanoparticles for BiologicalApplications
J. Park 1,2, H. Kang 1, Y.H. Kim
1, S.-W. Lee 1, T.G. Lee 1 and J.S. Wi 1, 1 KRISS and 2
Sungkyunkwan Univ., Korea
10P-7-48
High Stable Electron Emission ofSurface-Modified
ZnO
Nanowires
S.-H. Yang and N.-C. Hsu, Univ.
of Applied Sci., Taiwan

10P-7-45
Gas Sensor Applications of Zinc
Oxide-Vanadium Oxide 1D
Nanocpomosites
Y.C. Liang and Y.R. Cheng, Natl.
Taiwan Ocean Univ., Taiwan

10P-7-46
Effect of Fe2O3 on the
Supercacitive
Propertyof
ZnFe2O4
F.O. Agyemang and H. Kim,
Myongji Univ., Korea
10P-7-50
Study of Superior Photocatalytic
and Photodetection Properties
Using
ZnO/ZnS
Core-shell
Nanorod Arrays
Y.-R. Liu, S.-L. Tsai, S.-S. Lin, N.C. Yu and C.-Y. Chen, Natl. Chi
Nan Univ., Taiwan

10P-7-52
Metal-Organic
Framework
Coated Nanocarbon Electrodes
for Low-Temperature Lithium-ion
Battery
Y. Ishii, Y. Taniguchi and S.
Kawasaki, Nagoya Inst. ofTechnol., Japan

10P-7-49
Fabrication of Co3O4 Nanotube
Arrays by Using Cobalt/chitosan
Precursor on ZnO Nanorod
Array Templates
Y.-C. Lee 1, H.-C. Yang 1, H.-H.
Chou 1 and J.-C. Tsai 2, 1 Kun
Shan Univ. and 2 Natl. Cheng
Kuang Univ., Taiwan
10P-7-53
Design of Highly Efficient
Thermoelectric
Nanowires
BasedonFirst-Principles
Electronic Structure
K. Nakamura 1,2, 1 Kyoto Univ.
and 2 Egypt-Japan Univ. of Sci.
and Technol., Egypt

Chairperson: S. Takami (Tohoku Univ.)
10P-7-54
10P-7-55
Nano Silver Particles Infiltrated Preparation of TPP/ Magnetic
Three-Dimensional Crimped Silk Chitosan Nanoparticles as a
Yarn
Drug Delivery System
P. Wang, P. Zhang, Y.Y. Chen, H. H.-H. Chou, H.-C. Yang and Y.Lin, D.S. Zhang, Y. Liu and Y. C. Lee, Kun Shan Univ., Taiwan
Zhang, Soochow Univ., China

10P-7-56
Technological Advanced by UV
Irradiation of PEDOT Based Thin
Film Using the Electrolysis
Polymerization Method
M. Takahasi, T. Deguchi and M.
Takashiri, Tokai Univ., Japan

10P-7-57
Effectsof
Pluronic
andFibronectin on JSR Photoinduced Surface Control Polymer
for Cell Culturing Template
K.S. Kiang 1, A. Desalvo 1, S.
Peteers 2, K. Hoshiko 2, H.
Hamaguchi 3, H. Morgan 1 andH.M.H. Chong 1, 1 Univ. ofSouthampton, UK, 2 JSR Micro
NV, Belgium and 3 JSR, Japan
10P-7-113L Withdrawn
Rambutan Rind Extract-Assisted
Silver Nanoparticle Synthesis
and Its Antibacterial Activity
N.
Yongvanich
andS.
Phongtongpasuk,
Silpakorn
Univ., Thailand

Inorganic Nanomaterials
Chairperson:
10P-7-43 Withdrawn
A Facile Synthesis of SilicaCoated FeCo Nanocubes
K. Chokprasombat 1, S.
Pinitsoontorn 2 and S. Maensiri
3, 1 Thaksin Univ., 2 Khon Kaen
Univ. and 3 Suranaree Univ. ofTechnol., Thailand
10P-7-47
Synthesis of Carbon-Co3O4
Nanorods Composite and Its
Application
towards
Water
Oxidation
A.R. Jadhav, H.A. Bandal and H.
Kim, Myongji Univ., Korea
10P-7-51
Solvothermal Preparation andElectrochromic Properties of
W18O49 Nanowire Arrays on FTO
Substrate
C.-H. Lu 1, M.H. Hon 1, Y.-C. Lu
2 and I.-C. Leu 3, 1 Natl. Cheng
Kung Univ., 2 Natl. Taiwan Univ.
and 3 Natl. Univ. of Tainan,Japan

Organic Nanomaterials

10P-7-58
Molecular Design of RadicalFunctionalized Fullerene andCarbon Nanotubes (CNT): A
DFT Study
H. Tachikawa, T. Iyama and H
Kawabata, Hokkaido Univ.,
Japan

10P-7-59
ComputerAided-Molecular
Design of Organic RadicalFunctionalized
Graphene:
Density Functional Theory (DFT)Study
T. Iyama, H. Kawabata and H.
Tachikawa, Hokkaido Univ.,
Japan

10P-7-112L
Synthesis
andAdsorption
Properties
ofPolymerMesoporous SiO2 Nanocomposite
Based on Cellulose Biomass Via
Self-Assembly
J. Tao 1, J. Xiong 2, C. Jiao 1, Y.
Chen 1 and H. Lin 1, 1 Soochow
Univ., China and 2 Nanyang
Technol. Univ., Singapore

NanoTool
Chairperson: K. Sugano (Kobe Univ.)
10P-7-60
10P-7-61
Nanopipette-BasedAtomic Cell Viability in Flash Freezing
Force
Microscopefor Method after Cryopreservation
Nanofabrication
M. Shinose 1, A. Ueno 2, S.
T.S. Song, S. An, J. Whang and Yamaguchi 2 and Y. Akiyama 1,
W. Jhe, Seoul Natl. Univ., Korea 1 Shinshu Univ. and 2
MICROJET, Japan

10P-7-62
ApproachtoChromosome
Structure by Ga FIB/SEM andNe FIB/HIM
S. Sasakura 1, A. Yoshida 2, K.
Kaneyoshi 1, A. Dwiranti 1, H.
Takata 1, S. Uchiyama 1, Y.
Otsuka 2, S. Ogawa 1,3 and K.
Fukui 1,4, 1 Osaka Univ., 2 Toray
Res. Ctr., 3 AIST and 4 Tottori
Univ., Japan-7-

10P-7-63
MixingandBlistering
Phenomena in Etching Processof Gold Surface on Silicon
Dioxide Layer Using Helium Ion
Microscopy
E. Maeda 1, T. Iijima 2, S. Migita
2, S. Ogawa 2 and R. Kometani
1, 1 Univ. of Tokyo and 2 AIST,Japan

MNC 2016, November 8-11, 2016, ANA Crowne Plaza Kyoto, Kyoto, Japan
10P-7-64
Enhanced the Sensitivity of AFM
Cantilevers by Controlling theIrradiated Configuration of Laser
N.D. Vy 1, L.T. Dat 2, H.T. Huy 2
and T. Iida 3, 1 Ton Duc Thang
Univ., 2 Ho Chi Minh City Univ. of
Sci., Vietnam and 3 Osaka Pref.
Univ., Japan
10P-7-68
Development of Combined
System of Pulsed Laser
Deposition and Non-Contact
Atomic Microscopy and High
Resolution Imaging of AnataseTiO2(001)
Reconstructed
SurfaceD. Katsube 1, H. Yamashita 1,2,
S. Abo 1, F. Wakaya 1 and M.
Abe 1, 1 Osaka Univ. and 2 JSTPRESTO, Japan
10P-7-72
Single-MoleculeSurfaceEnhanced Raman Spectroscopyof 4,4'-bipyridine on FabricatedSubstrates with Directionally
ArrayedGold
Nanoparticle
DimersK. Sugano, K. Aiba, K. Ikegami
and Y. Isono, Kobe Univ., Japan

10P-7-65
Adhesion
MeasurementofMicro-patterned Surfaces Using
3D Printed AFM Tips
C.-Y. Hung, Y.-P. Yeh, C.-K.
Sung, W.-C. Liao, T.-H. Chuang
and C.-C. Fu, Natl. Tsing Hua
Univ., Taiwan

10P-7-66
Drift
Compensationfor
Measuring Lattice Constant by
Atomic Force Microscopy
B.-C. He, I-C. Lee, G.-J. Wu, and
W.-E. Fu, ITRI, Taiwan

10P-7-69
Molecular Scale Investigations of
Hydration
StructuresofHydrophilic Alkanethiol SelfAssembled Monolayers by FMAFM
A. Fujita, K. Kobayashi and H.
Yamada, Kyoto Univ., Japan

10P-7-70
STM-Induced Light Emission
Annalysis of a Chiral Perylene
Derivative on the Au(111) andNiAl(110) Surfaces
N. Yajima, S. Chaunchaiyakul, P.
Krukowski, M. Akai-Kasaya, A.
Saito and Y. Kuwahara, Osaka
Univ., Japan

10P-7-67
Molecular-Scale Imaging of TwoDimensional
Streptavidin
Crystals in Aqueous Solutions by
Frequency-Modulation Atomic
Force microscopy
M. Miyamoto, H. Kominami, K.
Kobayashi and H. Yamada,Kyoto Univ., Japan
10P-7-71
Optimization of Gold Nanorod
Array
Structureon
Microresonator for ResonantBased
Laser
Wavelength
Measurement
Using
Photothermal Conversion
K. Sugano 1, Y. Tanaka 1, E.
Maeda 2, R. Kometani 2 and Y.
Isono 1, 1 Kobe Univ. and 2 Univ.
of Tokyo, Japan

10P-7-73
Optical Sensor Design Based on
Bloch Surface Waves on OneDimensional Photonic Crystal
Substrate
Y.-J. Hung and I.-S. Lin, Natl.
Sun Yat-Sen Univ., Taiwan

Nanoimprint, Nanoprint and Rising Lithography
Chairperson: A. Miyauchi (Hitachi)
10P-7-74
10P-7-75
Prototype of Complementary Study of Organic Thin Film
Pattern Generator for Control of Transistors with 3-D Finlike
Fabricatedby
Residual Layer Uniformity in Channels
Nanoimprint
Technology
Nanoimprint Lithography
H.J.H. Chen 1, T.-N. Lee 2, J.-S.
S.-W. Youn, K. Suzuki and H. Tang 1 and K.-C. Hsieh 2, 1 Natl.
Hiroshima, AIST, Japan
Chi Nan Univ. and 2 Natl. Tsing
Hua Univ., Taiwan
10P-7-78
10P-7-79
Fabrication of Nanogratings on Nanoimprinting Silica Templates
Nanocellulose Films Using a with Micro-, Sub-20-nm, and 7Roll-to-RollNanoimprinting nm Patterns Fabricated byElectron Beam Lithography
MethodS. Ito 1, E. Kikuchi 1, M.
T. Mäkelä, M. Kainlauri, T. Watanabe 2, Y. Sugiyama 2 andTammelin and U. Forsström, M. Nakagawa 1, 1 Tohoku Univ.
VTT Technical Res. Ctr., Finland and 2 ELIONIX, Japan

10P-7-76
Growth of Aluminum Oxide on
and in Imprinted Resin Patterns
by an Atomic Layer Deposition
TechniqueN. Hiroshiba, S. Kuroyanagi and
M. Nakagawa, Tohoku Univ.,
Japan
10P-7-80
Nanoimprint of High Refractive
Index Resin Composed of
Episulfide Material
K. Namiki, S. Fuse, E. Koshiishi
and K. Furukawa, Mitsubishi Gas
Chemical, Japan

10P-7-77
EvaluationofThermalNanoimprint Resin with PDMS
Additive for Improving Release
Property
S. Fukui, M. Okada and Y.
Haruyama, Univ. of Hyogo,Japan
10P-7-114L
Fabrication of Self-Standing Thin
Polystyrene Films with ThroughHoles by use of Imprint Process
N. Sakamoto, H. Kawata, M.
Yasuda and Y. Hirai, Osaka Pref.
Univ., Japan

10P-7-83
PolymerFilm-Based
Flow
Regulatory
Valvesfor
Disposable Microfluidics
X. Zhang, G. Zhao, N. Xiang and
Z. Ni, Southeast Univ., China

10P-7-84
Reconfigurable
Microfluidic
Channel Capable of Patterningof Cells
M. Oono, A. Takano and N. Futai,
Shibaura Inst. of Technol., Japan

10P-7-87
Neuronal Activity Evoked by
Femtosecond
Laser-Induced
Stimulation
C. Hosokawa 1, Y. Nakagawa
1,2, S.N. Kudoh 2 and T. Taguchi
3, 1 AIST, 2, Kwansei Gakuin
Univ. and 3 NICT, Japan

10P-7-88
Evaluation of the Diffusion
Progress in the Microfluidic Static
Gradient Generator
M. Tamura 1, Y. Shiota 1, A.
Yoshino 1, T. Ogawa 2, A. Takano
1 and N. Futai 1, 1 Shibaura Inst.
of Technol. and 2 Tokyo Medical
and Dental Univ., Japan

BioMEMS, Lab on a Chip
Chairperson: A. Matsumoto (Tokyo Medical and Dental Univ.)
10P-7-81
10P-7-82
A Single Human Pluripotent Development of a Fluorescence
Stem Cell Culture Platform
Polarization-Based
HighL. Yu 1, J. Li 1, W. Yang 2, F. Throughput Assay System for
Tang 2, N. Fujimoto 1, M. Molecular Interaction Screening
Nakajima 1, Y. Chen 1,3, L. Liu 1 O. Wakao 1, M. Maeki 1, A.
and H. Kotera 1, 1 Kyoto Univ., Ishida 1, H. Tani 1, A. Hibara 2
Japan 2 Peking Univ., China and and M. Tokeshi 1, 1 Hokkaido
3 CNRS-ENS-UPMC, France
Univ. and 2 Tohoku Univ., Japan
10P-7-85
10P-7-86
Label-Free
Detectionof Demonstration of ELISA on
Influenza Subtypes Based on Steadily Rotating Centrifugal
Multisite Binding to Sialic Acid Microfluidic Device with ThreeReceptors Immobilized Gold Dimensionally Extended Solid
Electrode
Y. Horiguchi, T. Goda, A. Phase
Matsumoto and Y. Miyahara, S. Okamoto and Y. Ukita, Univ. ofTokyo Medical and Dental Univ., Yamanashi, Japan
Japan

-8-

MNC 2016, November 8-11, 2016, ANA Crowne Plaza Kyoto, Kyoto, Japan

Microsystem Technology and MEMS
Chairperson: T. Namazu (Aichi Inst. of Technol.)
10P-7-89
10P-7-90
The Development of a Resonant Dependency of Microstructure
Temperature Micro-Sensor by on Exothermic Characteristics
Electroforming Process
for Al/Ni Multilayer Materials
Y.-H. Lin 1, Y.-C. Shieh 2, C.-C. Based on Cold-rolled Method
Chen 1, C.-N. Hsiao 1, M.-H. N. Kametani 1, T. Izumi 1, S.
Shiao 1 and C.-T. Lin 1, 1 Natl. Miyake 1, S. Kanetsuki 1,2 and T.
Applied Res. Labs. and Natl. Namazu 2, 1 Kobe City College
Chiao Tung Univ., Taiwanof Technol. and 2 Aichi Inst. ofTechnol., Japan
10P-7-93
10P-7-94
Fabricationof
Ni/Cr2O3 Microscale
PhloemSap
Composite
Microstructures Dynamics Measurement Sensor
Using
Femtosecond
Laser Device for Monitoring theReductive Sintering of NiO/Cr TransportofNutritive
Mixed Nanoparticles
Substances in Plant Shoots
K. Tamura, M. Mizoshiri, J. A. Ono 1, Y. Yano 2, K. Terao 1,
Sakurai and S. Hata, Nagoya H. Takao 1, R. Ichihashi 2, T.
Univ., Japan
Kobayashi 2, I. Kataoka 2 and F.
Shimokawa 1, 1 Kagawa Univ.
and 2 Mitsubishi Electric, Japan
10P-7-97
Floating Thin-membrane BasedSAW Gyroscope for Higher
Sensitivity
M.H. Lee, H.S. Choi, C.H. Choiand K.K. Lee, Ajou Univ., Korea

10P-7-98
Enhancement of Efficiency forPower Generation of a PlateType Thermoelectric Power
Generator by Stacking the
Thermoelectric Plates
T. Daimon and H. Tohmyoh,
Tohoku Univ., Japan

10P-7-91
Thermoplasmonic
Marangoni
Flow Around a Microbubble in
Degassed Water
K. Namura, K. Nakajima and M.
Suzuki, Kyoto Univ., Japan

10P-7-92
FabricationofThin-Film
Thermoelectric Generators with
Ball Lenses for Conversion of
Near-infrared Solar Energy
Y. Ito, M. Mizoshiri, M. Mikami, J.
Sakurai and S. Hata, Nagoya
Univ., Japan

10P-7-95
Optimisation of Subthreshold
Leakage Current in Resonant
Gate Transistor
R Latif 1,2, B.Y. Majlis 2 and R
Cheung 1, 1 Univ. of Edinburgh,
UK and The Natl. Univ. of
Malaysia, Malaysia

10P-7-96
X-ray Evaluation of High
Verticality Sidewalls Fabricatedwith Deep Reactive Ion Etching
K. Takeuchi 1, Y. Ezoe 1, K.
Ishikawa 2, K. Nakamura 1, M.
Numazawa 1, M. Terada 1, M.
Fujitani 1, D. Ishii 1, Y. Noda 1, T.
Ohashi 1, K. Morishita 3, K.
Nakajima 4 and K. Mitsuda 2, 1
Tokyo Metropolitan Univ., 2
ISAS/JAXA, 3 Kyoto Univ. and 4
JST, Japan
10P-7-115L
LiNbO3/Si Hybrid Wafer Bonded
in Ambient Air Using Laser
Irradiation
R. Takigawa, H. Kawano, H.
Ikenoue and T. Asano, Kyushu
Univ., Japan

10P-7-99
Fabrication of Thick Glass
Layers for Thermal Isolation by
Glass Reflow Process
N.V. Toan and T. Ono, Tohoku
Univ., Japan

10P-7-116L
Development of a Small RF
Variable Capacitor Integrated
with Authomatic Fluid Carrying
SystemS. Kanazawa 1, T. Nishihara 1, Y.
Shibasaki 2, Y. Ogawa 2, H. Fujii
1, T. Furutsuka 1 and K. Suzuki
1, 1 Ritsumeikan Univ. and 2
Taiyo Ink, Japan
Room A (Heian 3,4, 2F)
18:20-20:20
Banquet-9-

MNC 2016, November 8-11, 2016, ANA Crowne Plaza Kyoto, Kyoto, Japan

Friday November 11
Room A (Heian 4, 2F)

Room B (Suzaku 2, 2F)

Room C (Suzaku 1, 2F)

Room D (Daigo, 2F)

Inorganic

11C-8: Nano Resistive andAtomic Switching Devices
T. Yanagida (Kyushu Univ.)
N. Banno (NEC)

11D-8: BioMEMS, Lab on a
Chip IT. Akagi (Univ. of Tokyo)
K. Tawa (Kwansei Gakuin Univ.)

11B-8-1
9:00
Nature of BaTiO3 Nanocubes for
Self-Assembly and Dielectric
Abnormally (Invited)
K. Kato, K. Mimura, Q. Ma, Z. Liu
and K. Yasui, AIST, Japan

11C-8-1
9:00
Conductance Quantization in
Binary-Oxide-Based
ReRAM
Cells (Invited)
Y. Nishi, H. Sasakura, Y.
Kuriyama and T. Kimoto, Kyoto
Univ., Japan
11C-8-2
9:30
Resistive Switching Mechanisms
in Memristors with TiO2/Al2O3
Bilayer Structures
L. Alekseeva 1, M. Baranovskii 1,
V. Luchinin 1, A. Petrov 1, T.
Chikyow 2 and T. Nabatame2, 1
St. Petersburg Electrotechnical
Univ., Russia and 2 NIMS, Japan

11D-8-1
9:00
Cell-Generated
Nichesfor
Organ-on-a-Chip Microdevices(Invited)
Y. Torisawa, Kyoto Univ., Japan

11C-8-3
9:50
p-type Polymer-Based Ag2S
Atomic Switch for 'Tug of War'Operation
C. Lutz 1,2, T. Hasegawa 1 and
T. Chikyow 2, 1 Waseda Univ.
and 2 NIMS, Japan
11C-8-4
10:10
Quantized
ConductanceOperation Near a Single-Atom
Point Contact in a PolymerBased Atomic Switch
K, Krishnan, T. Tsuruoka and M.
Aono, NIMS, Japan

11D-8-3
9:50
A Prime-Boost
Vaccination
Strategy
Basedon
Chitosan/Gamma-Polyglutamic
Acid Microneedle Patches with a
Two-Stage Release Profile
M.-C. Chen and Y.-Y. Chen, Natl.
Cheng Kung Univ., Taiwan
11D-8-4
10:10
Measurement of the Surface
Protein Level and Diameter of
Individual Extracellular Vesiclesof Human Breast Cancer Cells
on a Microfluidic Chip
T. Akagi 1, H. Kishita 1, Y.
Suehiro 1, S. Oniyanagi 1 and T.
Ichiki 1,2, 1 Univ. of Tokyo and 2
iCONM, Japan
11D-8: Author's Interview:
11:55-12:05

11A-8: Symp. A: Metrology andInspectionfor
Advanced
Patterning
S. Nagahara (Tokyo Electron)
A. Yamaguchi (Hitachi)
11A-8-1
9:00
Metrology and Inspection for
Next Generation Lithography(Invited)
M. Asano, Toshiba, Japan

11B-8:
Nanomaterials II
M. Suzuki (AIST)
T. Taniguchi (NIMS)

11A-8-2
9:30
Current
andFutureRequirements for Metrology andInspectionfor
Advanced
Patterning (Invited)
P. Leray, A.L. Charley, P. Wong,
S. Halder and P. Foubert, imec,
Belgium

11B-8-2
9:30
Universal Design Rule for Single
Crystalline Oxide Nanowires
GrowthK. Nagashima 1, H. Anzai 1, D.
Sakai 1, Z. Zhu 1, A. Inoue 1, C.
Nakamura 1, A. Klamchuen 2, M.
Suzuki 1, H. Yoshida 3, M. Kanai
1, G. Meng 1, F.W. Zhuge 1, Y.
He 1, S. Takeda 3, T. Kawai 3
and T. Yanagida 1, 1 Kyushu
Univ., Japan, 2 NANOTEC,
Thailand and Osaka Univ.,
Japan
11B-8-3
9:50
Highly Organized Layer-byLayer Assembly of Perovskite
Ferroelectric Superlattices
M.S. Khan 1,2, M. Osada 1,2, Y.
Ebina 1 and T. Sasaki 1, 1 NIMS
and 2 Waseda Univ., Japan
11B-8-4
10:10
Crystal Orientation DependenceofBi-layered
Ferroelectric
Nanostructures in Epitaxial PillarMatrix Nanocomposite Films
Y. Kawahira, S. Maruyama and
Y. Matsumoto, Tohoku Univ.,
Japan

11A-8-3
10:00
Outlook of Mask Registraton andRequired Metrology Technology(Invited)
K.-D. Roeth, KLA, Germany

11A-8-4
10:30
Electron-Beam Metrology andInspection: Scaling, Variability,
and Productivity (Invited)
Y. Momonoi and H. Fukuda,
HitachiHigh-Technologies,
Japan

11B-4: Author's Interview:
11C-4: Author's Interview:
11:55-12:05
12:05-12:15
Room P (Heian 1,2,3, 2F)
Coffee BreakRoom A (Heian 4, 2F)

Room B (Suzaku 2, 2F)

Room C (Suzaku 1, 2F)

11A-9:
Advanced
Photolithography
J. Miyazaki (ASML)
T. Sato (Toshiba)
11A-9-1
11:15
Readiness of EUV Lithography
and Its Impacts on Design and
Patterning of Backend Layers for
5nm Node and Beyond (Invited)
T.-B. Chiou 1, A. Chen 2 and M.
Dusa 2, 1 ASML Taiwan, Taiwan
and 2 ASML US, USA
11A-9-2
11:45
Development of 250w 13.5nm
LPP-EUV Light Source for HVM
Lithography
J. Fujimoto, T. Saito and H.
Mizoguchi, Gigaphoton, Japan

11B-9:
Inorganic
Nanomaterials III
T. Taniguchi (NIMS)
J. Hamagami (Kanto Gakuin)
11B-9-1
10:45
Laser Ablation in Liquid: from
Nanocrystals
SynthesistoNanostructures
Fabrication(Invited)
G.W. Yang, Sun Yat-sen Univ.,
China

11C-9: Nanosensor Devices
K. Takei (Osaka Pref. Univ.)
T. Yanagida (Kyushu Univ.)

11B-9-2
11:15
A Dual-Mode Substrate Basedon Ultrathin Silica Coated Silver
Nanocubes
andModified
Aluminum
Sheetfor
Biomolecular Detection
N.M. Kha 1, W.-N. Su 1 and B.-J.
Hwang 1,2, 1 Natl. Taiwan Univ.
of Sci. and Technol. and 2 Natl.
Synchrotron Radiation Res. Ctr.,
Taiwan11C-9-2
11:05
Effect of Yttrium Content andThermal Annealing on the
Structural
Properties
andSensing
CharacteristicsofYbYxOy Sensing Membranes
T.-M. Pan 1, C.-W. Wang 1, H.-C.
Wang 1 and L. Chi 2, 1 Chang
Gung Univ., Taiwan and 2
Westfälische Wilhelms Univ.
Münster, Germany

11C-9-1
10:45
Acetone Sensing by Graphene
Sensor
H. Nemoto, R. Ueki, Q. Fang, T.
Matsuki, R. Fukui and S.
Warisawa, Univ. of Tokyo, Japan- 10 -

11D-8-2
9:30
Development of a Microfluidic
Probe Integrated Device for High
Resolution Spatial Chemical
Stimulation Control
K. Shinha 1, M. Horayama 1, T.
Fujii 2 and H. Kimura 1, 1 Tokai
Univ. and 2 Univ. of Tokyo, Japan

Room D (Daigo, 2F)
11D-9: BioMEMS, Lab on a
Chip II
H. Nagai (AIST)
Y. Takamura (JAIST)
11D-9-1
10:45
Combination of Microdevices
and Biological Cells to Create
Novel Principle Devices (Invited)
Y. Tanaka, RIKEN, Japan

11D-9-2
11:15
Patterning of Kinesin Moleculeson Au Nano-Pillars by Selective
SAM Coatings
T. Kaneko, S. Ando, H. Shintaku,
H. Kotera and R. Yokokawa,
Kyoto Univ., JapanMNC 2016, November 8-11, 2016, ANA Crowne Plaza Kyoto, Kyoto, Japan
11A-9-3
12:05
Process-Induced Variability in
Multiple Patterning Extension
M. Yamato, A. Hara, S. Natori, K.
Koike, S. Yamauchi, K. Oyama
and H. Yaegashi, Tokyo Electron,Japan

11A-9: Author's Interview:
12:25-12:35

11B-9-3
11:35
Characterization of Cu2ZnSnSe4
Nanoparticles
Preparedat
Various Temperatures
T. Suzuki 1, T. Suzuki 2, S. Hori 2
and S. Nonomura 2, 1 Japan
Fine Ceramics Ctr. and 2 Gifu
Univ., Japan

11C-9-3
11:25
Design and Fabrication ofPolymer-based Photonic Crystal
Waveguidefor
Sensing
Application
J. Sun, H. Hisamoto, K. Sueyoshi
and T. Endo, Osaka Pref. Univ.,
Japan
11C-9-4
11:45
Voltammetric
DetectionofHydrochlorothiazide
Using
Functionalized CNT
K.K. Reddy and H. Kim, Myongji
Univ., Korea
11B-9: Author's Interview:
11C-9: Author's Interview:
11:55-12:05
12:05-12:15
Lunch

11D-9-3
11:35
Application of a Bull's Eyeplasmonic Chip to Highly
Sensitive Bio-detection with a
Microscope
S. Izumi 1, M. Toma 1, C.
Hosokawa 2 and K. Tawa 1,2, 1
Kwansei Gakuin Univ. and 2
AIST, Japan

11D-9: Author's Interview:
11:55-12:05

Room A (Heian 4, 2F)

Room B (Suzaku 2, 2F)

Room C (Suzaku 1, 2F)

Room D (Daigo, 2F)

11A-10: Resist and Directed
Self-Assembly
T. Nagai (JSR)
T. Azuma (Toshiba)

11B-10:Inorganic
Nanomaterials IV
J. Hamagami (Kanto Gakuin)
M. Suzuki (AIST)

11C-10: Nano Devices
T. Maemoto (Osaka Inst. ofTechnol.)
Y. Hotta (Univ. of Hyogo)

11A-10-1
14:00
Directed Self-Assembly of Highχ Block Copolymers (Invited)
A. Vora, N. Arellano, K. Schmidt,
D.P. Sanders and R.D. Allen,
IBM Research Almaden, USA

11B-10-1
13:30
Preparation of Graphene OxideCoated Silk Fibers through
HBPAA Induced Layer-by-Layer
Self-assembly
J. Song 1,2, S. Xu 1, T. Chen 2,
S. Yamanaka 1 and H. Morikawa
1, 1 Shinshu Univ., Japan and 2
Jiang Univ. of Sci. & Technol.,China
11B-10-2
13:50
Pulse-induced
Resistive
Switching Device of Pt/TiO2-5/Pt
Cross-Point
Structure
withElectron-Ion Mixed Conduction
K. Kawamura 1, T. Tsuchiya 2, M.
Takayanagi 1, M. Minohara 3, M.
Kobayashi 3, K. Horiba 3, H.
Kumigashira 3, K. Terabe 2 and
T. Higuchi 1, 1 Tokyo Univ. of
Sci., 2 NIMS and 3 KEK, Japan
11B-10-3
14:10
Structural and Magnetic Domain
Characterization of Lateral MnAs
Nanowires
R. Horiguchi, H. Kato, K.
Kabamoto, R. Kodaira and S.
Hara, Hokkaido Univ., Japan

11C-10-1
13:30
Structural
Properties
andElectrical Characteristics of
Sm2Tio5 Gate Dielectrics for
InGaZnO Thin-Film Transistors
T.-M. Pan 1, H.-C. Wang 1, Y.-H.
Huang 1, C.L. Chan 1, J.-L. Her
1 and K. Koyama 2, 1 Chang
Gung Univ., Taiwan and 2
Kagoshima Univ., Japan
11C-10-2
13:50
Impact of Ti Content on Electrical
Characteristicsof
ErTixOy
Charge Storage Layer in
InGaZnO Thin-Film Transistor
Nonvolatile Memories
T.-M. Pan, C.-H. Chen, Y.-H. Hu
and J.-L. Her, Chang Gung Univ.,
Taiwan11D-10:Microsystem
Technology and MEMS III
S. Nagasawa (Shibaura Inst. ofTechnol.)
M. Ikeuchi (Univ. of Tokyo)
11D-10-1
13:30
Tactile Display for Stiffness
Distribution
Using
Magnetorheological Fluid Array
H. Ishizuka 1 and N. Miki 2, 1
Kagawa Univ. and 2 Keio Univ.,
Japan

11A-10-2
14:30
A Molecular Dynamics Analysison
PS-Brush
Surface
Modification for Pre-Treatment of
DSA
T. Nakano 1 and M. Muramatsu
2, 1 Tokyo Electron and 2 Tokyo
Electron Kyushu, Japan
11A-10-3
14:50
Sensitivity Enhancement ofChemically
Amplified
EUV
ResistbyAddingAcid
Generation Promoters
S. Fujii 1, K. Okamoto 1, H.
Yamamoto 2, T. Kozawa 2 and T.
Itani 3, 1 Hokkaido Univ., 2
Osaka Univ. and 3 EIDEC,Japan

11B-10-4
14:30
Shape Control of Ferromagnetic
MnAs Nanoclusters and Their
Magnetizationin
Semiconducting InAs Nanowires
R. Kodaira, K. Kabamoto and S.
Hara, Hokkaido Univ., Japan
11B-10-5
14:50
Nanoscale Liquid as a Novel
Nanomaterial and Its Atomic
Force Microscopic Study
M. Lee, S. An, T.S. Song and W.
Jhe, Seoul Natl. Univ., Korea

11P-10: Author's Interview:
15:10-15:20

11C-10-3
14:10
Temperature Dependence ofGate-all-around Poly-Si Nanowire
Junctionless Transistors with
Multiple Channels and Sub-50
nm Twin Gate
C.-T. Tso, T.-Y. Liu, F.-M. Pan and
J.-T. Sheu, Natl. Chiao Tung
Univ., Taiwan
11C-10-4
14:30
Molecular Dynamics Study on
Dipole Layer Formation at Highk/SiO2 Interface: -Possibility of
Oxygen Ion Migration Induced by
the Imbalance of Multipole
PotentialsR. Kunugi, N. Nakagawa and T.
Watanabe, Waseda Univ., Japan
11C-10-5
14:50
MEMS Fabricated Conformal
Electrodes
Attempting
Thermotunnelling Refrigeration
A. Banerjee, Y. Hirai, T. Tsuchiya
and O. Tabata, Kyoto Univ.,
Japan

11B-10: Author's Interview:
15:10-15:20- 11 -

11C-10: Author's Interview:
15:10-15:20

11D-10-2
13:50
Development of a Fully Flexible
Micro-stimulation Electrode Tip
R. David and N. Miki, Keio Univ.,
Japan

11D-10-3
14:10
Breathing Signal Analysis of
Mouse during Drug Inhalation
H. Kawaoka 1, Y. Hasegawa 1,
M. Matsushima 2, T. Kawabe 2
and M. Shikida 1, 1 Hiroshima
City Univ. and 2 Nagoya Univ.,
Japan
11D-10-4
14:30
Effect of Guide Tube Length on
Sensor Output in Inspired Airflow
Measurement
Y. Hasegawa 1, N. Harada 1, M.
Matsushima 2, T. Kawabe 2 andM.Shikida, 1 Hiroshima City
Univ. and 2 Nagoya Univ., Japan
11D-10-5
14:50
Finger-tip Size Quantitative
Real-time PCR Device for Early
Detection of Cancer 2nd Report:
The Detection of Cancer SpecificMicroRNAY. Kimura, M. Ikeuchi and K.
Ikuta, Univ. of Tokyo, Japan
11D-10: Author's Interview:
15:10-15:20

MNC 2016, November 8-11, 2016, ANA Crowne Plaza Kyoto, Kyoto, Japan
Room P (Heian 1,2,3, 2F)

11P-11: 15:20-17:20 POSTER SESSION II
Advanced Photolithography
Chairperson: J. Miyazaki (ASML)
11P-11-1
Actinic EUV Mask Inspection
using Coherent EUV Light fromHigh Harmonic Generation
B. Moon 1,2, Y.S. Kim 3, Y.T. Kim
1, H. Sung 4, J. Kim 4, B.-K. Ju 2
and Y.M. Jhon 1, 1 KIST, 2 Korea
Univ., 3 Hanmi Semiconductor
and 4 Laser Spectronix, Korea

11P-11-98L
Optimization of High Harmonic
Generation of Coherent EUVLight for EUV Metrology:
Simulations and Experiments
M.K. Jung 1,2, Y.S. Kim 3, Y. Kim
1, Y.T. Kim 1, H. Sung 4 and J.
Kim 4, J.H. Lee 2 and Y.M. Jhon
1, 1 KIST, 2 Univ. of Seoul, 3Hanmi Semiconductor and 4
Laser Spectronix, Korea

11P-11-99L
Improvement of Mask-DefectDetection
Performanceof
Coherent EUV Scatterometry
Microscope with High-HarmonicGeneration EUV Source
D. Mamezaki 1, T. Harada 1, Y.
Nagata 2 and T. Watanabe 1, 1
Univ. of Hyogo and 2 RIKEN,
Japan

Resist and Directed Self-Assembly
Chairperson: K. Yoshimoto (Kyoto Univ.)
11P-11-2
11P-11-3
Measurementof
Dependence of Dissolution In-situ
Kinetics of ZEP 520A on Change Outgassing Generated fromof Molecular Weight Induced by EUV Resist Including Metal
Oxide Nanoparticles During
Electron Beam Irradiation
Electron Inradiation
A. Konda 1, H. Yamamoto 1, T. S. Takahasi 1, Y. Minami 1, M.
Kozawa 1 and S. Yoshitake 2, 1 Kaboi 1, Y. Matsumoto 1, A.
Osaka Univ., and 2 NuFlare Sekiguchi 1 and T. Watanabe 2,
Technol., Japan
1 Litho Tech Japan and 2 Univ. of
Hyogo, Japan
11P-11-6
11P-11-7
Polysaccharide
Block PMMA-Selective
OrganicCopolymers Made from Woods Inorganic Hybridization Usingfor the Contact Hole and L/S Cylindrically
Micro-Phase
Applications on Directed Self- Separated PS-block-PMMA
Assembly Lithography
K. Morita and K. Yamamoto, Oji N. Hiroshiba and M. Nakagawa,Tohoku Univ., Japan
Holdings, Japan

11P-11-4
Removal of SU8 with N-Methyl2-Pyrrolidone Doping LiCl and
H2O
M. Yasui 1, H. Nakano 2, M.
Kurouchi 1, T. Ozawa 1, S.
Kawano 2 and S. Kaneko 1, 1
Kanagawa Industrial Technol.
and 2 Nomura Micro Sci., Japan

11P-11-5
Controllable
Micro-Optical
Element Molds Fabricated by
Self-AssemblyandMetalAssisted Chemical Etching
P. Jin, Y. Han, A. Jin and A.
Wang, Harbin Inst. of Technol.,China

11P-11-10
Characterization of Coke, orCarbonaceous Matter, Formedon CoMo Catalysts Used in
Hydrodesulfurization Unit in Oil
RefineryN. Kimura, Y. Iwanami, R. Koide
and R. Kudo, JX Nippon Oil andEnergy, Japan
11P-11-14
Electrospun
CarbonNanofibers/nickel
Hydroxide
Composites as Supercapacitor
Electrodes
C.-T. Lo and C.-C. Lai, Natl.
Cheng Kung Univ., Taiwan

11P-11-11
Energetics
andElectronic
Structuresof
Molecular
Complexes Consisting of Large
Fullerene and Cyclohydrocarbon
Y. Nagasawa and S. Okada,
Univ. of Tsukuba, Japan

11P-11-18
Energetics
andElectronic
Structure of h-BN Nanoribbons
A. Yamanaka and S. Okada,
Univ. of Tsukuba, Japan

11P-11-19
High Performance Heat-Treated
Mono-Layer Graphene-Based
Hybrid Photo-Voltaic Device
S.M.
Sanip
and
M.S.
Shamsudin,
Univ.
ofSouthampton
Malaysia,
Malaysia
11P-11-23
Effect of Metal Nanoparticles on
Carrier
AccumulationinGraphene under an Electric Field
M. Matubara and S. Okada, Univ.
of Tsukuba, Japan

Nanocarbons
Chairperson: S. Okada (Univ. of Tsukuba)
11P-11-8
11P-11-9
A Top-Down Strategy towards Electronic Structure of CNT Thin
Single-Digit Nanodiamonds
Films with Nanoscale Interfaces
J. Xiao and G.W. Yang, Sun Yat- under an Electric Field
sen Univ., China
T. Kochi and S. Okada, Univ. of
Tsukuba, Japan

11P-11-12
Stretchable
Fiber-Typed
Supercapacitors
Basedon
CarbonFiber
Electrodes
DecoratedwithThreeDimensional Carbon NanotubeGraphene Hybrid Networks
N. Kim, H. Cha, W. Lee and Y.
Oh, KIMS, Korea
11P-11-16
Protein
Adsorption
Characteristics on Bare andPhosphorylcholine-Modified
Graphene Film on SiC Substrate
Y. Taniguchi, T. Miki, T. Mituno, Y.
Ohno, M. Nagase, K. Minagawa
and M. Yasuzawa, Tokushima
Univ., Japan
11P-11-20
Engineering Function Groups inGraphene Oxide
T. Taniguchi 1, M. Osada 1, K.
Hatakeyama 2 and Y. Matumoto
2, 1 NIMS and 2 Kumamoto
Univ., Japan

11P-11-13
Synthesis of Highly Aligned
Carbon Nanotubes by One-Step
Liquid-phase Process: Effects ofCarbon Sources on Morphology
of Carbon Nanotubes
K. Yamagiwa 1, Y. Ayato 2 and J.
Kuwano 3, 1 Teikyo Univ. of Sci.,
2 Shinshu Univ. and 3 Tokyo
Univ. of Sci., Japan
11P-11-17
Work Function Modulation ofEdge Functionalized Graphene
Nanoflakes
R. Taira, A. Yamanaka and S.
Okada, Univ. of Tsukuba, Japan

11P-11-21
Initial Stage of h-BN Growth inDiffusionandPrecipitation
MethodS. Suzuki, Y. Ogawa, S. Wang
and K. Kumakura, NTT, Japan

11P-11-22
Porous Hydrocarbon Networksof Pyramidal Molecules
J. Sorimachi and S. Okada, Univ.
of Tsukuba, Japan- 12 -

11P-11-15
CarbonNanodots/silicon
Nanowires Heterostructures for
Efficient Photodegradation ofDyes
P.-H. Hsiao, B.-S. Chen and C.Y. Chen, Natl. Chi Nan Univ.,
TaiwanMNC 2016, November 8-11, 2016, ANA Crowne Plaza Kyoto, Kyoto, Japan
11P-11-24
Carrier Doping Effect of Humidity
for Single-Crystal Graphene on
SiC
M. Kitaoka, T. Nagahama, K.
Nakamura, T. Aritsuki, K.
Takashima, Y. Ohno and M.
Nagase, Tokushima Univ., Japan

11P-11-25
Kondo Effect in Graphene
Quantum Dots
Y. Kanai 1, T. Ono 1, Y. Ohno 1,2,
K. Maehashi 1,3, K. Inoue 1, andK. Matsumoto 1, 1 Osaka Univ.,
2 Tokushima Univ. and 3 Toky
Univ. of Agriculture and Technol.,Japan

11P-11-26
Energetics
andElectronic
Properties of a Hexagonally
Bonded Sheet of GaN Under
Biaxial Compression
Y. Gao and S. Okada, Univ. of
Tsukuba, Japan

11P-11-100L
Platform
forElectrical
Measurement of π-Conjugated
Polymer Wire with Graphene
Nanogap Electrodes
T. Ikuta 1, S. Tamba 1, Y. Kanai
1, Y. Ohno 1,2, K. Maehashi 1,3,
K. Inoue 1, Y. Ie 1, Y. Aso 1 andK. Matsumoto, 1 Osaka Univ., 2
Univ. of Tokushima and 3 Tokyo
Univ. of Agriculture and Technol.,Japan

11P-11-29
Channel Shape Effects on theElectrical Characteristics ofFinFETs
I-C. Lee 1, B.-C. He 1, Y.-S.
Chien 1, W.-E. Fu 1, Y.-C. Wei 2,
J.-D. Luo 2, K.-C. Chuang 2, H.C. Cheng 2, 1 ITRI and 2 Natl.
Chiao Tung Univ. Taiwan

11P-11-30
Nanocrystalline Graphite Coated
SOI Nano-Electrome Chanical
Switches
L. Boodhoo 1, S. Rana 2, Y.
Tsuchiya 1, W. Redman-White 1,
S.H. Pu 1,3, H. Mizuta 1,4, D.
Pamunuwa 2 and H.M.H. Chong1, 1 Univ. of Southampton, 2
Univ. of Bristol, UK, 3 Univ. ofSouthampton
Malaysia,
Malaysia and 4 JAIST, Japan
11P-11-34
Controlling Carrier Injection of
QLEDs by Introducing Graphene
Oxide Quantum Dots Doped
PEDOT:PSS
C.-C. Wu 1, H.-C. Yu 1 and Y.-K.
Su 1,2, 1 Natl. Cheng-Kung Univ.
and 2 Kun-Shan Univ., Taiwan

11P-11-101L
Locally Pinned Free Standing
Graphene Growth on C-face 4HSiC{1-10n}
Y. Kutsuma, D. Dojima, K.
Ashida and T. Kaneko, Kwansei
Gakuin Univ., Japan

Nanodevices
Chairperson: Y. Ishikawa (Nara Inst. of Sci. and Technol.)
11P-11-27
11P-11-28
Preliminary Study on Origin of Fabrication and Characterization
Low and Broad Vth Fluctuation on of Silicon Notched Nanowire
Low-Vth Side Caused by Ion FETs with Selective Channel
Implantation to Source and Drain Dopants
Extensions of SOI Tri-Gate Z. Tan 1, T. Iwasaki 1,2, L.
FinFET Using 3D Process and Boodhoo 1, H. Mizuta 1,2 andDevice Simulations
H.M.H. Chong 1, 1 Univ. of
T. Tsutsumi, Meiji Univ., Japan
Southampton, UK and 2 JAIST,Japan
11P-11-31
Simulation
andTechnical
Feasibility Study of 80 nm
Asymmetric T Shape Gate forHigh Breakdown Voltage at HighOperation Frequency in GaN
HEMTs
J. Shao, J. Deng, X. Huang, S.
Zhang and Y. Chen, Fudan Univ.,
China
11P-11-35
Improvementof
QuantumConfinedStark
Effectin
InGaN/GaN Blue Light-Emitting
Diodes with Partial Quantum
Barrier Si-doping
Y.H. Hsu, Y.Z. Chiou and C.K.
Wang, Southern Taiwan Univ. ofSci. and Techno., Taiwan
11P-11-39
One-Dimensional
Photonic
Crystal
Nanocavity
with
Monolayer
Molybdenum
Disulfide (MoS2) for Enhanced
Light-Matter Coupling
H, Qiu 1, T, Liu 1, T, Ying 1, C,
Huang 2, G, Liang 1, B, Qiang 1,
Y, Shen 1, N, Taksatorn 3, H,
Wang 1, Z, Shen 1, Q, Wang 1, 1
Nanyang
Technol.
Univ.,
Singapore,
2
Univ.
of
Southampton, UK and 3
GenIsys, Germany
11P-11-102L
Self-Rectifying and Forming
Free Stable Resistive Switching
Behavior Observed in HfO2Based Memory by Quantum
Tunneling Mechanism
M. Yun, S. Kim and H.-D. Kim,
Sejong Univ., Korea

11P-11-32
Capacitorless 1T-DRAM Basedon
Double-Gate
GaAs
Junctionless Transistor
Y.J. Yoon, J.H. Seo, Y.I. Jang,
M.S. Cho, J.-H. Lee and I.M.
Kang, Kyungpook Natl. Univ.,
Korea

11P-11-33
Charge Retention in Vertical van
der
Waals
Heterostructure
Encapsulated
Semi-Metallic
GrapheneD. Chu and E.-K. Kim, Hanyang
Univ., Korea

11P-11-36
Improved Metal Migration of theElectrode Reflector for GaNBased Blue Light Emitting
DiodesY.Y. Chen, Y.Z. Chiou and C.K.
Wang, Southern Taiwan Univ.,
Taiwan11P-11-40
Self-capacitance of Atomic andMolecular
Scale
Devices:
Properties and Scope ofApplications
P. Szarek, Univ. of Warsaw,
Poland

11P-11-37
High-Performance P-Channel
Thin-Film Transistors on Lightly
Doped N-Type Excimer-LaserCrystallized Germanium Films
C.-Y. Liao, C.-Y. Huang, M.-H.
Huang and H.-C. Cheng, Natl.
Chiao Tung Univ., Taiwan
11P-11-41
Enhanced
Fluorescence
Detection of Fluoride Ions via
Nanometallic Plasmonic Effect
R. Appiah-Ntiamoah, B. Tesfaye
and H. Kim, Myongji Univ., Korea

11P-11-38
Silicon Carbide Nanostructured
Field Emission Array
A.S. Ivanov, V.A. Ilyin, V.V.
Luchinin and V.N. Titov, St.
Petersburg
Electrotechnical
Univ., Russia

11P-11-103L
Extremely Thin Metal-InsulatorSemiconductor Diode Consist of
2D Nanomaterials
H. Jeong 1,2, H.M. Oh 1, S. Bang
1, H.J. Jeong 1, S.-J. An 1, G.H.
Han 1, H. Kim 1, K.K. Kim 3, J.C.
Park 1, Y. Kim 4, Y.H. Lee 1, G.
Lerondel 1,2 and M.S. Jeong 1,
1 Sungkyunkwan Univ., Korea, 2
Univ. de Techologie de Troyes,
France, 3 Dongguk Univ. and 4
Dankook Univ., Korea

11P-11-104L
Improving Read Disturbance inChannel Stacked NAND Flash
Memory with Layer Selection by
Multilevel Operation
D.-B. Kim 1, D.W. Kwon 1, B.-S.
Jo 2, G.S. Cho 2, S.-K. Park 2
and B.-G. Park 1, 1 Seoul Natl.
Univ. and 2 SK Hynix, Korea

11P-11-105L
Investigation of Silicide Induced
Dopant Activation for Steep
Tunnel Junction in Tunneling
Field Effect Transistor (TFET)
S. Kim, D.W. Kwon, E. Park, J.
Lee, R. Lee, J.-H. Lee and B.-G.
Park, Seoul Natl. Univ., Korea- 13 -

11P-11-42
Optical and Electrochemical
Performance of a Novel ZrO2IPTES-graft-PVdFHFP
Nanocomposite
Polymer
Electrolyte in Electrochromic
Devices
J.M.C. Puguan and H. Kim,
Myongji Univ., Korea

MNC 2016, November 8-11, 2016, ANA Crowne Plaza Kyoto, Kyoto, Japan
11P-11-106L
Comparative Investigation on
PlatinumandTitanium
Thermistors
for
RoomTemperature Antenna-Coupled
Terahertz
Microbolometer
Application
A. Banerjee, H. Satoh, T. Ajay, N.
Hiromoto and H. Inokawa,Shizuoka Univ., Japan

11P-11-107L
Back-Gate Effect on MultiChannel Nanowire Tunnel FieldEffect Transistors (TFETs) for
Modulating Turn-on Point
E. Park, D.W. Kwon, J. Lee, S.
Kim, R. Lee, J.-H. Lee and B.-G.
Park, Seoul Natl. Univ., Korea

11P-11-108L
Demonstration
ofReconfigurable Field EffectTransistor (RFET) for 3D
Stacked TFET Application
R. Lee, D.W. Kwon, J. Lee, E.
Park, S. Kim and B.-G. Park,
Seoul Natl. Univ., Korea

11P-11-109L
Capacitor-Less DRAM Cell
Using
Thyristor
VerticallyFabricated with Polycrystalline
SilicoD.W. Kwon, E. Park, J. Lee, R.
Lee, S. Kim, H.M. Kim and B.-G.
Park, Seoul Natl. Univ., Korea

Chairperson: K. Tomioka (Hokkaido Univ.)
11P-11-43
11P-11-44
Mass
ChangeStudy on Direct Patterning Sensitized
by
Using
Au
Method of the Oxide Materials Detection
Electrodeforwithout Using Photolithography, Nanoporous
Biosensing
Photoresist and Plasma Etching
H. Terasawa, N. Asai, T. Shimizu,
Y. Yoshimoto, J. Li and T. S. Shingubara and T. Ito, Kansai
Shimoda, JAIST, Japan
Univ., Japan

11P-11-45
Cerium Iron Oxide Nanorods
Shape Evaluation for Epoxide
Opening Reaction through Azide
Addition
A.A. Chaugule, H.A. Bandhal
and H. Kim, Myongji Univ., Korea

11P-11-46
Preparation and Characterizationof Silver Nanoparticles in Methyl
Cellulose Matrix
K. Kolarova, D. Samec, A.
Reznickova, S. Rimpelova and V.
Svorcik, Univ. of Chemistry andTechnol., Czech
11P-11-50 Withdrawn
Mobility and Channel Length
Dependency in ZnO Thin Film
Transistors
A. Mohamed 1, H.M.H. Chong 2
and K. Kalna 1, 1 Swansea Univ.
and 2 Univ. of Southampton, UK

Nanofabrication

11P-11-47
Nano-Porous Lattice Biosensor
Using Anodic Aluminum Oxide
Substrate
Y. Matsuda, N. Asai, T. Shimizu ,S. Shingubara and T. Ito, Kansai
Univ., Japan

11P-11-48
Novel Top-Down Fabrication of
ZnO Nanowires by Atomic Layer
Deposition and Anisotropic Dry
Etch Process
M. Ebert, N.A.B. Ghazali, K.S.
Kiang, M.R.R. de Planque and
H.M.H.
Chong,
Univ.
ofSouthampton, UK
11P-11-52
Fabrication of Cu2ZnSnS4 thin
Films by Non-Vacuum Process
Using Electro-Deposition and
Sulfurization with Liquid CS2
Sulfur Source
C.E. Wang 1, T. Shimizu 2, S.
Tanaka 3, T. Terui 3 and S.
Shingubara 2, 1 Changchun Univ.
of Sci. and Technol., China, 2Kansai Univ. and 3 NICT, Japan
11P-11-56
Evaluation of Controlled Strain in
Silicon Nanowire by UV Raman
Spectroscopy
R. Yokogawa 1, S. Hashimoto 2,
S. Asada 2, M. Tomita 1,2,3, T.
Watanabe 2 and A. Ogura 1, 1
Meiji Univ., 2 Waseda Univ. and3 JSPS, Japan

11P-11-49
Formation of Multi-Stacked Ge
Quantum Dot Utilizing CarbonMediated Template and Its
Photoluminescence Property
Y. Itoh 1,2, T. Kawashima 1 andK. Washio 1, 1 Tohoku Univ. and2 JSPS Res., Japan
11P-11-53
Adsorption
Behaviorof
Nanoparticles on V-Groove for
One-Dimensional Array
T. Ban, M. Uenuma 2, S. Migita
3, I. Yamashita 2, Y. Uraoka 2
and S. Yamamoto 1, 1 Ryukoku
Univ., 2 NAIST and 3 AIST,Japan
11P-11-57
High Density Formation of Ta/TaOxide Core-Shell Nanodots
Y. Wang, D. Takeuchi, A. Ohta,
M. Ikeda, K. Makihara and S.
Miyazaki, Nagoya Univ., Japan

11P-11-110L
Nanoscale Surface Structural
Evolution in GaAs Digital Wet
EtchingwithSub-second
Oxidation
andDissolution
Process
R. Kuroda, X. Yin, and S. Kasai,
Hokkaido Univ., Japan

Chairperson:
11P-11-58
Raman
SpectroscopyofHexagonal Boron Nitride
I. Wlasny 1, P. Kazmierczak 1, Z.
Klusek 2 and A. Wysmolek 1, 1
Univ. of Warsaw and 2 Univ. ofLodz, Poland

11P-11-59
Raman and Photoluminescence
Mapping of Few-Layer MoS2
H. Rho 1, H. Kim 1 and S.M. Kim
2, 1 Chonbuk Natl. Univ. and 2
KIST, Korea

11P-11-60
Photoluminescence
Characterization of Mono Layer
MoS2 by Laser Thinning
T. Minamino 1, T. Murakami 2, K.
Kisoda 1 and C. Itoh 2,
Wakayama Univ., Japan

11P-11-61
EngineeringofDielectric/
Ferroelectric Responses in 2D
Perovskites
M. Osada, NIMS, Japan

11P-11-62
Formationof
Crystalline
Heteroepitaxial SiC Films on Si
by Carbonization of Polyimide
Langmuir-Blodgett Films
V.V. Luchinin 1, S.I. Goloudina 1,
V.M. Pasyuta 1, M.F. Panov 1,
A.N. Smirnov 2, D.A. Kirilenko 2,
T.F. Semenova 3, 1 St.
Petersburg
Electrotechnical
Univ., 2 Loffe Inst. RAS and 3 St.
Petersburg Univ., Russia

11P-11-63
Development of the Pulsed
Laser Liquid Phase Epitaxy
Process for High Quality SiC
Films
R. Yamaguchi 1, A. Onuma 1, A.
Osumi 1, S. Maruyama 1, T.
Mitani 2, T. Kato 2, H. Okumura 2
and Y. Matsumoto 1,3, 1 Tohoku
Univ., 2 AIST and 3 JST-ALCA,Japan

11P-11-64
Surface Stress Relief During Ge
Wetting Layer and Nanodot
Formation on Si(111)
Y. Uozumi 1,2, T. Yamazaki 3
and H. Asaoka 1, 1 JAEA, 2
Hitachi Power Solution and 3
Eiko Eng., Japan

11P-11-65
Characterization of ALON Buffer
Layers for GaN Growth on
Sapphire Substrate
T. Hata 1, T. Yamazaki 1, Y.
Yamane 1, K. Kumakura 2, H.
Yamamoto 2 and T. Makimoto 1,
1 Waseda Univ. and 2 NTT,
Japan

11P-11-51
A Novel PMMA/NEB Bilayer
Process for Sub-15 nm Gold
Nanoslits by RIE Assisted
Electron Beam Lithography
X. Huang, J. Shao, C. Tsou, S.
Zhang, B. Lu and Y. Chen, Fudan
Univ., China
11P-11-55
Impact of Ar+ Ion Irradiation on
Nickelidaton Reaction of Si
Nanowire Covered with Oxide
Film
S. Asada 1, S. Hashimoto 1, X.
Zhang 1, T. Xu 1, S. Oba 1, R.
Yokogawa 2, M. Tomita 1,2,3, A.
Ogura 2, T. Matsukawa 4 and T.
Watanabe 1, 1 Waseda Univ., 2
Meiji Univ., 3 JSPS and 4 AIST,Japan
11P-11-111L
Switching Properties of NiO
Nanowire ReRAM
T. Aono 1, K. Sugawa 1, T.
Shimizu 2, S. Shingubara 2 andK. Takase 1, 1 Nihon Univ. and 2
Kansai Univ., Japan

11P-11-54
Fully Bottom-up Process toFabricate
Non-Closepacked
Nanopillar Arrays for Photonic
Applications
S. Suganuma, Y. Kaneko, K.
Namura and M. Suzuki, Kyoto
Univ., Japan

Inorganic Nanomaterials- 14 -

MNC 2016, November 8-11, 2016, ANA Crowne Plaza Kyoto, Kyoto, Japan
11P-11-66
Electronic
StructureofAmorphous WO3-x Thin Film by
Soft-X-Ray Spectroscopy
T. Sugimoto 1, W. Namiki 1, M.
Ochi 1, T. Higuchi 1, T. Tsuchiya
2, M. Minohara 3, M. Kobayashi
3, K. Horiba 3, H. Kumigashira 3
and K. Terabe 2, 1 Tokyo Univ. of
Sci., 2 NIMS and 3 KEK, Japan
11P-11-70
Tuning the Single-molecule
Conductance of Extended MetalAtom Chains by Electrochemical
GatingC.H. Chen E.-C. Horng, C.-H.
Ho, T.-C. Ting, L.-Y. Hsu, M.-J.
Huang, H.-C. Lu, C.-H. Hsu andS.-M. Peng, Natl. Taiwan Univ.,
Taiwan11P-11-67
Optical Hydrogen Gas Sensor
Consisting of Pd-Loaded Titania
Nanocomposite Coating on
Flexible Plastic Substrate
J. Hamagami, G. Takaya and A.
Endo, Kanto Gakuin Univ.,
Japan

11P-11-68
A High Performance Microbial
Fuel Cell with Nickel Nanoparticle
as Cathode Catalyst
M. Gebresemati, W.G. Kidanu,
S.W. Yoon and H.H. Yoon,
Gachon Univ., Korea

11P-11-69
Synthesisof
Ag3VO4
Nanoparticles
Loadedon
Bi2MoO6
Nanoplates
as
Heterostructured Visible Light
Driven Photocatalyst
A. Phuruangrat, Prince ofSongkla Univ., Thailand

11P-11-74
Implementation of a Nanoimprint
First Level into Device Fabrication
Flows Which Require HighAlignment Accuracy
S. Pauliac-Vaujour and S.
Landis, CEA-LETI, France

11P-11-75
Large-Scale Patterning Diamond
Nanopillar Arrays Using Metal
Contact Nanoimprinting
W. Zhang 1, Y. Wang 1,2, Y. Wu
1, B. Zhang 1, P. Jin 2, 1 Suzhou
Inst. of Nano-Tech and NanoBionics and 2 Harbin Inst. ofTechnol., China

11P-11-71
Effect of Starting Powder
Morphology on Film Texture for
BismuthLayer-Structured
Ferrolectrics
PreparedbyAerosol Deposition Method
M. Suzuki, T. Tsuchiya and J.
Akedo, AIST, Japan

Nanoimprint, Nanoprint and Rising Lithography
Chairperson: M. Okada (Univ. of Hyogo)
11P-11-72
11P-11-73
Development of Multi-Layer Controllable
Micro-Optical
Imprint Process for Solid Oxide Element Molds Fabricated by
Fuel Cell
Self-assembly Templating and
K. Tokumaru, F. Tsumori, K. Metal-Assisted
ChemicalKudo, T. Osada and K. Etching
Shinagawa, Kyushu Univ., Japan P. Jin, Y. Han, A. Jin and A.
Wang, Harbin Inst. of Technol.,China
11P-11-76
11P-11-77
High-Aspect-Ratio
Structure Characteristic Evaluation of
FabricationbyRoom- Organic Light-Emitting Diodes by
Temperature Nanoimprinting
Stamp Printing Technique
M. Okada and S. Matsui, Univ. of A.
Chittawanij
andK.
Hyogo, Japan
Locharoenrat, King Mongkut's
Inst. of Technol., Thailand

11P-11-78
Dependence of Film Thickness
on Surface Elasticity and
Acrylate Consumption in UVCured Thin Film on Au Surfaces
H. Yano 1, X. Liang 2, S. Kubo 3,
N. Fukuda 4, H. Ushijima 4, K.
Nakajima 2 and M. Nakagawa 1,
1 Tohoku Univ., 2 Tokyo Inst. ofTechnol., 3 NIMS and 4 AIST,Japan

BioMEMS, Lab on a Chip
Chairperson: T. Akagi (Univ. of Tokyo)
11P-11-79
11P-11-80
Numerical
Investigationof Optical Trapping Dynamics
Perforated
Polymer Depend on Initial Assembling ofMicrocantilever
Sensorfor Quantum-Dotconjugated
ReceptorsonContractile
Behaviorof Glutamate
Hippocampal Neurons
Cardiomyocytes
T. Kishimoto 1,2, Y. Maezawa 1,
T.N. Nguyen, D.-W. Lee and B.- S.N. Kudoh 2, T. Taguchi 3 andK. Lee, Chonnam Natl. Univ., C. Hosokawa 1,2, 1 AIST, 2
Korea
Kwansei Gakuin Univ. and 3
NICT, Japan
11P-11-83
11P-11-84
Development of Micro-Tube Reduction of Analysis Time in theMass Production Device for Size Separation of Large DNA
Microbial Culture in Open Using
Size
Exclusion
Environment
Chromatography-Based
K. Fujimoto, K. Higashi, H. Onoe Electrophoresis
Microchipand N. Miki, Keio Univ., Japan
Driven by Pulsed Electric Field
N. Azuma, S. Itoh, K. Fukuzawa
and H. Zhang, Nagoya Univ.,
Japan
11P-11-87
11P-11-112L
A Miniaturized Total Analysis Proposal of Molecular Tensile
System for Real-Time PCR
TestingbyaCentrifugal
H. Nagai 1, N. Naruishi 1, S. Microfluidic Approach
Furutani 1 and T. Fukuzawa 2, 1 M. Otake and Y. Ukita, Univ. of
AIST and 2 Nippon Sheet Glass, Yamanashi, JapanJapan

11P-11-81
Thermal Bonding of Polyimide toForm Sealing Microchannels
H. Mekaru, AIST, Japan

11P-11-85
Rapid and Sensitive Detection ofInterleukin-6 with a Sandwich
Immunoassay on the Plasmonic
Chip
K. Tawa 1, M. Sumiya 1, C.
Sasakawa 1, T. Sujino 2, H.
Nakazawa 2 and M. Umetsu 2, 1
Kwansei Gakuin Univ. and 2
Tohoku Univ., Japan
11P-11-113L
Cell Migration Control by
Boundary
Shapeof
Topographical Structure
C. Okutani, A. Wagatsuma, K.
Mabuchi and T. Hoshino, Univ. ofTokyo, Japan- 15 -

11P-11-82
Long-term Perfusion Culture
Model of 3D Microvascular
Remodeling
S. Maeda 1, A. Takano 1, A.
Nakamasu 2, R. Yokokawa 3, T.
Miura 2 and N. Futai 2, 1
Shibaura Inst. of Technol., 2
Kyushu Univ. and 3 Kyoto Univ.,
Japan
11P-11-86
Surface
Stress
Evaluation
Inducedby
Biomolecular
Adsorption on Freestanding
Elastomer Nanosheet
R. Teramoto 1, T. Fujie 2,3, N.
Sato 4, S. Takeoka 4, K. Sawada
1 and K. Takahashi 1,3, 1
Toyohashi Univ. of Technol., 2
Waseda Univ. and 3 JSTPRESTO, Japan
11P-11-114L
Fabrication of Nanoarryas for
Exosome Fixation by Lift-off
ProcessandChemical
Modification in Aqueous Solution
S. Yokota, H. Kuramachi and T.
Ichiki, Univ. of Tokyo, JapanMNC 2016, November 8-11, 2016, ANA Crowne Plaza Kyoto, Kyoto, Japan

Microsystem Technology and MEMS
Chairperson: S. Nagasawa (Shibaura Inst. of Technol.)
11P-11-88
11P-11-89
ofPractical
Patterning of Wettability Using PossibilitythePhotocatalytic Application of Al/Ni Exothermic
Decomposition of Hydrophobic Reactive Bonding Technique for
Hermetic Packaging
SAM on the TiO2 Pattern
K. Kuwabara 1, S. Ito 1, S.
H. Maeda, T. Kobayahi and S. Kanetsuki 2,3, S. Miyake 4, S.
Konishi, Ritumeikan Univ., Japan Inoue 1 and T. Namazu 3, 1 Univ.
of Hyogo, 2 Kobelco Res. Inst., 3
Aichi Inst. of Technol. and 4 Kobe
City College of Technol., Japan
11P-11-92
11P-11-93
MEMS Origami Sheet without Fabrication of Microstructures on
Dry-transferred
Freestanding
Vaccum Process
S. Akashi and S. Nagasawa, Graphene for NanomechanicalShibaura Inst. of Technol., Japan Resonator
K. Go 1, H. Ishida 1, K. Sawada
1 and K. Takahashi 1,2, 1
Toyohashi Univ. of Technol. and2 JST-PRESTO, Japan
11P-11-96
11P-11-97
Long-Term
Evaluationof Synthesis of Copper (I) Complex
BiofoulinginMicrofluidic with
Cu-C
Bond
for
ChannelsforImplantable Photoluminescent Devices
Artificial Kidney
T. Hayakawa, Y. Yabara, M.
T. Ota 1, N. To 1, Y. Kanno 2 and Hashimoto, H. Teramae, H.
N. Miki 1, 1 Keio Univ. and 2 Miyamae and T. Sakata, Josai
Tokyo Medical Univ., Japan
Univ., Japan
11P-11-117L
DevelopmentofWireless,
Chipless Neural Stimulator by
Using One-Port SAW Delay Lineand Diodecapacitor Interface
J. Kim, S. Kim and K. Lee, Ajou
Univ., Korea

11P-11-118L
Spherically Deformable Convex
Micromirror for
Beam-Spot
Imaging
M.M. Hossain, J.Y. Lee and S.H.
Kong, Kyungpook Natl. Univ.,
Korea

11P-11-90
Investigation of Aluminum/Nickel
Multilayered Block Size for SelfPropagating
Exothermic
Reaction on a Silicon Wafer
T. Namazu 1, S. Ito 2, S.
Kanetsuki 1,3 and S. Miyake 4, 1
Aichi Inst. of Technol., 2 Univ. of
Hyogo, 3 Kobelco Res. Inst. and4 Kobe City College of Technol.,Japan
11P-11-94
Micro Brush Actuator Using SelfOscillating Gel
T. Hirakawa and S. Maeda,
Shibaura Inst. of Technol., Japan

11P-11-115L
Spiking Neural Networks with
Unsupervised Learning Basedon STDP Using Resistive
Synaptic Devices and Analog
CMOS Neuron Circuit
M.-W. Kwon, J. Park, M.-H.
Baek, S. Hwang and B.-G. Park,
Seoul Natl. Univ., Korea
11P-11-119L
Operation of Three-Dimensional
MEMS
MirrorbySingleSuperposed Driving Signal
T. Nagasawa, Y. Oguchi and E.
Iwase, Waseda Univ., Japan- 16 -

11P-11-91
DevelopmentofMagneticDriven Artificial Cilia with High
Aspect Ratio
R. Marume, F. Tsumori, K. Kubo,
T. Osada and K. Shinagawa,
Kyushu Univ., Japan

11P-11-95
Raman Spectroscopic Study on
Focused Ion Beam Induced
Damage in Silicon Surface
Y. Goshima 1, S. Kashiwagi 1, S.
Inoue 2 and T. Namazu 3, 1
Horiba, 2 Univ. of Hyogo and 3
Aichi Inst. of Technol., Japan
11P-11-116L
Microfabrication of Stretchable
Electrocardiogram Device with a
Flexible
Skin
Patch
for
Continuous
Monitoringof
Biological Signals
W.I. Jang, B.K. Lee, J.H. Ryu, I.B. Baek, S. Byun, H.Y. Yu and S.
Kim, ETRI, Korea