MNC 2014, November 4-7, 2014, Hilton Fukuoka Sea Hawk, Fukuoka, Japan

Tuesday, November 4
Room A (Vega, 3F)
13:00-16:10 MNC 2014 Technical Seminar in Japanese
Seala Brasserie and Lounge (4F)
17:30-19:30 Get Together Party

Wednesday, November 5
Room P-1 (Argos A, 1F)
5P-1: Plenary Session (9:50-12:10)
Chairpersons: S. Akita (Osaka Pref. Univ.) and K. Nishiguchi (NTT)9:30-9:50
Opening Remark: K. Ishibashi (RIKEN)Award Presentation: S. Akita (Osaka Pref. Univ.) and K. Ishibashi (RIKEN)
MNC 2013 Outstanding Paper, Most Impressive Presentation, Most Impressive Poster and Young Author’s Award
Announcement from Committee: T. Chikyow (NIMS)
5P-1-1
9:50-10:30

Adding New Capabilities to CMOS Integrated Circuits via Field‐Assisted Directed Assembly of Nanowire and 2D Crystal Materials(Plenary)

M. Li, T. Morrow, J. Kim, Y. Cao, T. Mallouk, X. Zhong, O. Gall, D. Deng, J. Robinson, M. Terrones, J. Mayer, C. Keating and T. Mayer, Pennsylvania State
Univ., USA

Lobby (1F)
Coffee Break
5P-1-2 10:50-11:30
Fabrication, Properties, and Applications of van der Waals Heterostructures (Plenary)J. Hone, Columbia Univ., USA

5P-1-3 11:30-12:10
Nanotechnology to Develop “The Magic Bullet” for Targeted Cancer Therapy (Plenary)
K. Kataoka, Univ. of Tokyo, Japan

Lunch
Room A (Vega, 3F)
5A-2: Electron and Ion BeamTechnologies (13:30-15:10)
H. Yamashita (NuflareTechnol.)J. Yanagisawa (Univ. of Shiga
Pref.)
5A-2-1
13:30
Computational Study on Electron
Beam Lithography (Invited)
M. Yasuda, Osaka Pref. University,Japan

5A-2-2
14:00
Advanced Nanoscale Analysis of
Semiconductor Materials by TEM
and SPM (Invited)

T. Soeda, T. Yamazaki and Y. Kotaka,
Fujitsu Labs., Japan

Room B (Rigel, 3F)
5B-2: Inorganic Nanomaterials(13:30-15:20)
T. Chikyow (NIMS)
X.W. Zhao (Tokyo Univ. of Sci.)

Room C (Chapel, 3F)
5C-2: Nanofabrication I (13:3015:00)
S. Shingubara (Kansai Univ.)
Y. Liu (AIST)

5B-2-1
13:30
Nanostructure Design of Functional
Ceramics by Solution Processes(Invited)

5C-2-1
13:30
Fabricationof
Nanogap
Electrodes by Molecular Ruler
Method (Invited)

5B-2-2
14:00
DeterminationofSeebeck
CoefficientandThermalConductivity of Highly Resistive
Sb2Se3 Single Nanowire

5C-2-2
14:00
Fabrication of Gold Nanocup
Array Templated by SiO2 Nanorod
Array as the 2nd Templates
through Liquid Crystalline Block
Copolymer Thin Films

5D-2-2
14:00
Thermogravimetric Analysis with
Sub-Femtogram
Resolution
Using
CarbonNanotubeResonator

N. Matsushita 1, K. Katsumata 1, M.
Yoshimura 1,2 and K. Okada 1, 1 Tokyo
Inst. of Technol., Japan and 2 Natl.
Cheng Kung Univ., Taiwan

T.-Y. Ko and K.W. Sun, Natl. Chiao Tung
Univ., Taiwan

H. Tanaka, Kyushu Inst. of Technol.,Japan

N. Yamashita 1, H. Komiyama 2, K.
Nagai 1, K. Kamata 2 and T. Iyoda 1, 1
Tokyo Inst. of Technol. and 2 JSTERATO, Japan

Room D (Boardroom, 3F)
5D-2:
Symp.
B:
HybridNanosystem I (13:30-15:10)
K. Nishiguchi (NTT)Y.-L. Chueh (Natl. Tsing-Hua
Univ.)
5D-2-1
13:30
Phonon Lasing (and Mode
Cooling) in an ElectromechanicalResonator (Invited)
I. Mahboob, K. Nishiguchi, A. Fujiwara
and H. Yamaguchi, NTT, Japan

F. Deno, K. Takei, T. Arie and S. Akita,
Osaka Pref. Univ., Japan

5A-2-3
14:30
Diffraction Based Coupler for NonDemolition Quantum Electron
Microscope in Free-Space

5B-2-3
14:20
Pd Catalysed Arylation of Hydrogen
Terminated Ge(111), Si (100) and Si
Nanowires

5C-2-3
14:20
Light Absorption Enhancement of
Amorphous Si by Plasmon Effects
of Gold Nanoparticles

5D-2-3
14:20
All-Mechanical Bistable Memory
in a Phonon Waveguide

5A-2-4
14:50
Effect of Carbon Coimplantation
with Different Energies on Boron
Distribution in Silicon: Atom Probe
Tomography Investigation

5B-2-4
14:40
Conductive
Polymer/Metal
Composites for Interconnect of
Flexible Devices

5C-2-4
14:40
High Density formation of FeSilicide Nanodots on SiO2
Induced by Remote H2 Plasma

5D-2-4
14:40
Plasmon-Induced
Photoexcitaiton of(Invited)

C.-S. Kim 1, Y. Yang 1, R. Hobbs 1, V.
Manfrinato 1, K.K. Berggren 1 and P.
Kruit 2, 1 MIT, USA and 2 TU Delft,
The Netherlands

Y. Shimizu 1, H. Takamizawa 1, B. Han
1, K. Inoue 1, F. Yano 2, S. Kudo 3, A.
Nishida 4 and Y. Nagai 1, 1 Tohoku
Univ., 2 Tokyo City Univ., 3 Renesas
Semiconductor and 4 Renesas
Electronics, Japan

A. Henriksson, T. Kobayashi, H. Maeda,
M. Miyachi, Y. Yamanoi and H.
Nishihara, Univ. of Tokyo, JapanJ. Kawakita, D. Gerlach, Y. Hashimoto,B. Horvath, T. Shuto and T. Chikyow,
NIMS, Japan-1-

S. Suenaga 1, Y. Ishikawa 1, K.
Ohdaira 2, M. Uenuma 1 and Y.
Uraoka 1, 1 NAIST and 2 JAIST, Japan

H. Zhang 1, K. Makihara 1, A. Ohta 1,
M. Ikeda 2 and S. Miyazaki 1, 1
Nagoya Univ. and 2 Hiroshima Univ.,
Japan

D. Hatanaka, I. Mahboob, K.
Onomitsu and H. Yamaguchi, NTT,Japan

Molecules

S. Yasuda and K. Murakoshi,
Hokkaido Univ., JapanMNC 2014, November 4-7, 2014, Hilton Fukuoka Sea Hawk, Fukuoka, Japan
5B-2-5
15:00
SynthesisofPorousGold
Nanoshells through a Combinationof Galvanic Replacement, Gold
Deposition, and Silver Dealloying
D. Wan and L. Wang, Natl. Tsing Hua
Univ., Taiwan

5A-2 Author's Interview:
15:10-15:20

5B-2 Author's Interview:
5C-2 Author's Interview:
15:20-15:30
15:00-15:10
Garden Lobby (3F)

5D-2 Author's Interview:
17:05-17:15

Coffee BreakRoom A (Vega, 3F)
5A-3: Symp. A: Advanced
Patterning I (15:25-16:55)
T. Sato (Toshiba)
G. Vandenberghe (IMEC)
5A-3-1
15:25
Extending Moore’s Law with
Complementary
Lithography(Invited)
Y. Borodovsky, Intel, USA

Room B (Rigel, 3F)
5B-3: BioMEMS, Lab on a Chip I(15:30-17:20)
T. Ichiki (Univ. of Tokyo)
Y. Takamura (JAIST)
5B-3-1
15:30
Biosensors for Cell Migration
Control and Cell Detection (Invited)
S.W. Pang, City Univ. of Hong Kong,
Hong Kong

Room C (Chapel, 3F)
5C-3: Innovative Microdevices(15:25-17:05)
S. Nagasawa (Shibaura Univ.)
E. Iwase (Waseda Univ.)
5C-3-1
15:25
Cross Talk Free and Noise
Reduction on Wearable Line-ofSight Detection System Using
Micro-FabricatedTransparent
Optical Sensors

Room D (Boardroom, 3F)
5D-3:
Symp.
B:
HybridNanosystem II (15:25-17:05)
S. Akita (Osaka Pref. Univ.)
I. Mahboob (NTT)
5D-3-1
15:25
Low Dimensional Nanomaterials:
Applications on Solar Cell andSolar Energy Storage (Invited)

5C-3-2
15:45
EEG Mesurement Using PolymerBasedDry
Micro-Needle
Electrode

5D-3-2
15:55
Tunnel Diode Composed
MoS2/SiO2/Si Heterojunction

Y.-L. Chueh, Natl. Tsing-Hua Univ.,
TaiwanC.T.C. Cesar 1, K. Sampei 1, O. Miho1, O. Masataka 1 and M. Norihisa 1,2,
1 Keio Univ. and 2 JST-PRESTO,
Japan

5A-3-2
15:55
EUV Lithography, a study of its
Impact on local CD Uniformity(Invited)

5B-3-2 Withdrawn (Oct. 27)
16:00
Control of Crystal Habit of Proteins
Using Microfluidic Chip

5A-3-3
16:25
LPP-EUV Source Technology for
HVM Lithography (Invited)

5B-3-3
16:20
A Hall Sensor LSI System to
Measure the Swelling of Glucose
ResponsiveGeltowardTransdermal Continuous Blood
Sugar Monitoring

5C-3-3
16:05
Bottom Arranged Electrodes in an
Electroactive Hydrogel Flexible
Coloring Element for a High FillFactor

5D-3-3
16:15
Graphene
ElectrodesforTransparent
andExtremely
Flexible Silicon Transistor

R. Imi and Y. Murakami, Toyohashi
Univ.of Technol., Japan

K. Usuki 1, H. onoe 2 and E. Iwase 1,
1 Waseda Univ. and 2 Keio Univ.,
Japan

5B-3-4
16:40
Hydrogen Silsesquioxane (HSQ)Based Nanofluidics

5C-3-416:25
Micro Slip Velocimeter by Using
Laser Doppler Effect

5D-3-4
16:35
SiliconNanostructures
forPhotonics and Photovoltaics(Invited)

C.-N. Ahn 1 and A.C. Chen 2, 1 ASML,
Korea and 2 ASML, Taiwan

T. Saito, H. Nakarai, T. Abe, K.M.
Nowak, Y. Kawasuji, H. Tanaka, Y.
Watanabe, T. Hori, T. Kodama, Y.
Shiraishi, T. Yanagida, G. Soumagne,
T. Yamazaki, S. Okazaki and H.
Mizoguchi, Gigaphoton, Japan

5A-3 Author's Interview:
16:55-17:05

M. Maeki 1,2,3, A.S. Pawate 4, K.
Watanabe 5, M. Tokeshi 2, P.J.A. Kenis
4 and M. Miyazaki 1,3, 1 Kyushu Univ., 2
Hokkaido Univ., 3 AIST, Japan, 4 Univ. of
Illinois, USA and 5 Saga Univ., Japan

S. Punniyakoti, R. Sivakumarasamy, F.
Vaurette and N. Clément, CNRS, France

5B-3-517:00
High-resolution
Microfabrication
Process in Half-Pipe Substrate for
3D Photolithography Application

K. Nikaido 1,2, M. Hayashi 1,2, Y. Zhang
1, M. Hayase 2, S. Matsumoto 1, T. Itoh
1 and R. Maeda 1, 1 AIST and 2 Tokyo
Univ. of Sci., Japan

5B-3 Author's Interview:
17:20-17:30

M. Arai 1, Y. Nishinaka 1, N. Miki 1,2, 1
Keio Univ. and 2 JST-PRESTO, Japan

N. Morita 1, Y. Hayashida 1, H. Nogami
1, E. Higurashi 2, T. Ito 3, P. Desmedt
1 and R. Sawada 1, 1 Kyushu Univ., 2
Univ. of Tokyo and 3 Kyushu Inst. ofTechnol., Japan

5C-3-5
16:45
Evaluation on Two-Port Junction
Configuration of a Lamé-Mode
Octagonal
Microelectromechanical Systems
Resonator Driven by a Low DC
Bias Voltage
K.Tsujishita, H.Tanigawa andSuzuki, Ritsumeikan Univ., Japan

5C-3 Author's Interview:
17:05-17:15

Room A （Vega, 3F）and Garden Garden Lobby (3F)
17:30-19:00 Happy Hour
Room A (Vega, 3F)
Commercial Presentation
17:35-17:40 EM Resist Ltd
17:40-17:45 GenISys GmbH
17:45-17:50 Nanofabrication Platform Consortium
17:50-17:55 UNISOKU / ORSAY PHYSICS
Garden Garden Lobby (3F)
18:00-19:00 Wine & Beer, Sponsored by Technical Exhibitor

-2-

K.

of

K. Nishiguchi 1, A. CastellanosGomez 2, H. Yamaguchi 1, A.
Fujiwara 1, H.S.J. van der Zant 2 andG.A. Steele 2, 1 NTT, Japan and 2 UTDelft, The Netherlands

H. Jang, W. Lee and J.-H. Ahn, Yonsei
Univ., Korea

F. Priolo, Univ. di Catania, Italy

5D-3 Author's Interview:
17:05-17:15

MNC 2014, November 4-7, 2014, Hilton Fukuoka Sea Hawk, Fukuoka, Japan

Thursday, November 6
Room A (Vega, 3F)
6A-4:
Advanced
Photolithography (9:00-10:30)
J. Miyazaki (ASML)
K. Oyama (Tokyo Electron)

Room B (Rigel, 3F)
6B-4: Nanostructure Engineerred
Devices (9:00-10:30)
Y. Chen (Fudan Univ.)
T. Maemoto (Osaka Inst. ofTechnol.)
6B-4-1
9:00
III-V/Ge Channel MOS Device
Technologies in Nano CMOS Era(Invited)

Room C (Chapel, 3F)
6C-4:
Process
andCharacterization I (9:00-10:30)
N. Miki (Keio Univ.)
T. Ando (Ritsumeikan Univ.)

6B-4-2
9:30
Multiple
Negative
Differential
Resistance Devices with Ultra-High
Peak-to-Valley Current Ratio for
Practical Multi-Valued Logic andMemory Applications

6C-4-2
9:30
Fabrication of Self-Propagating
Exothermic Microparticles Using
Injection Molding and Electroless
Plating Techniques

6D-4-2
9:30
Graphene-FET-Based
GasSensor Properties Depending on
Substrate Surface Conditions

6A-4-3
9:50
Improvement of Wavelength
Stability in an ArF Excimer Laser
for Multiple-Patterning Immersion
Lithography

6B-4-3
9:50
Violation of Equipartition of Energy
in Thermal Noise of a Small DRAM

6C-4-3
9:50
Design and Fabrication of a SelfHealing Metal Wire Using an
Electric Field Trapping of Gold
Nanoparticles

6D-4-3
9:50
CharacterizationofGraphene/Metal Interface and Its
Modification by Insertion of Thin
Nano-Carbon Layer

6A-4-4
10:10
Imaging Result of Small Phase
Defects Using Micro Coherent
EUV Scatterometry Microscope

6B-4-4
10:10
Gate-All-Around Poly-Si Nanowire
Junctionless Thin-film-transistors
with Multiple Channels

6C-4-4
10:10
Fabrication of a MOSFET Using
Full Minimal Fab Line

6D-4-4
10:10
Optimization of 3D Interconnects
Composed of Graphene andVertically Aligned CNTs for the
Future LSI Interconnects

6A-4-1
9:00
Enabling
Advanced
MultiPatterning Applications (Invited)

H. Yaegashi, K. Oyama, S. Yamauchi,
A. Hara, S. Natori and M. Yamato,Tokyo Electron, Japan

6A-4-2
9:30
Pattern Fidelity Control in Multiple
Patterning
Using
Etching
Photoresist
SmoothingandHardening

M. Yamato, A. Hara, S. Natori, N.
Okabe, S. Yamauchi, K. Oyama andH. Yaegashi, Tokyo Electron, Japan

S. Takagi 1 and M. Takenaka 2, 1 Univ.
of Tokyo and 2 JST-CREST, Japan

S. Shin and K.R. Kim, Ulsan Natl. Inst. ofSci. and Technol., Korea

K. Nishiguchi and A. Fujiwara, NTT,Japan

H. Miyamoto, T. Kumazaki, A. Kurosu,
T. Ohta, H. Tsushima, K. Kakizaki, T.
Matsunaga and H. Mizoguchi,
Gigaphoton, Japan

T. Harada 1, Y. Tanaka 1, T. Watanabe
1, T. Amano 2 and H. Kinoshita 1, 1
Univ. of Hyogo and 2 EIDEC, Japan

6A-4 Author's Interview:
10:30-10:40

6C-4-1
9:00
Integrated Micro Fabrication
Process for Non-Si Based MEMS
(Invited)
M. Mizoshiri, Nagoya Univ., Japan

K. Inoue 1, T. Fujito 1, K. Fujita 2, Y.
Kuroda 2, K. Takane 2 and T. Namazu
1, 1 Univ. of Hyogo and 2 Gauss,Japan

T. Koshi and E. Iwase, Waseda Univ.,
Japan

C.-T. Tso, T.-Y. Liu and J.-T. Sheu, Natl.
Chiao-Tung Univ., Taiwan

S. Khumpuang 1,2, F. Imura 2, H.
Asano 2 and S. Hara 1,2, 1 AIST and
2 Minimal Fab Res. Association,Japan

6B-4 Author's Interview:
6C-4 Author's Interview:
12:10-12:25
12:15-12:25
Garden Lobby (3F)

Room D (Boardroom, 3F)
6D-4: Graphene Appilication(9:00-10:30)
M. Tanemura (Nagoya Inst. ofTechnol.)
S. Okada (Univ. of Tsukuba)
6D-4-1
9:00
Graphene-Based Barriers forPreventing
OxidationandDiffusion (Invited)
T. Lee, J. Hong and S. Lee, Yonsei
Univ., Korea

M. Nakamura, Y. Kanai, Y. Ohno, K.
Maehashi, K. Inoue and K.
Matsumoto, Osaka Univ., JapanK. Katakura, Y. Ito, H. Tomori, Y.
Ootuka and A. Kanda, Univ. of
Tsukuba, Japan

D. Kondo 1,2, H. Nakano 1, B. Zhou 1,
A. I 1, K. Hayashi 1,2, M. Takahashi 1,
S. Sato 1,2 and N. Yokoyama 1,2, 1
AIST and 2 Fujitsu Labs., Japan

6D-4 Author's Interview:
12:15-12:25

Coffee BreakRoom A (Vega, 3F)
6A-5: Symp. A: Advanced
Patterning II (10:45-12:15)
H. Yamashita (NuflareTechnol.)J. Yanagisawa (Univ. of Shiga
Pref.)
6A-5-1
10:45
Limits of Lithography Beyond the
10-nm Node (Invited)
B. Lin, TSMC, Taiwan

Room B (Rigel, 3F)
6B-5: Optelectric Devices andMaterials (10:40-12:10)
Y. Ishikawa (Nara Inst. of Sci. andTechnol.)
S. Takagi (Univ. of Tokyo)
6B-5-1
10:40
Recent Progress on Quantum Dot
Intermediate Band Solar Cells(Invited)

Room C (Chapel, 3F)
6C-5:
Process
andCharacterization II (10:35-12:15)
T. Namazu (Univ. of Hyogo)
T. Sakata (NTT)Room D (Boardroom, 3F)
6D-5: Nanocarbon Property(10:35-12:15)
S. Akita (Osaka Pref. Univ.)
M. Nagase (Univ. of Tokushima)

6C-5-1
10:35
Tensile Testing in Vacuum withConcentrated
InfraredLight
Heating for Single Crystal Silicon
Mechanical Characterization atHigh Temperature

6D-5-1
10:35
ImprovementofElectrical
Performance in the Reduced
Graphene Oxide Films toward
Sensor Applications

6B-5-2
11:10
Hybrid Approach to UV Active Pixel
Sensor: Integration of GaN
Photodetector and Si-MOSFET
Circuit

6C-5-2
10:55
Softening of Metal Under
Ultrasonic Application Observedin Bonding of Au Compliant
Microbump

6D-5-2
10:55
A GaN MSM UV Sensor Using
Graphene Electrodes

6B-5-3
11:30
Improved Ultraviolet Sensitivity of
Photodiode Composed of p-NiO/nZnO-NWs by Thermal Annealing
Treatment on ZnO-NWs

6C-5-3
11:15
Fatigue Phenomenon of PMMA
Under Cyclic Stress Using
Electrostatic Com-Drive Actuator

6D-5-3
11:15
Energetics
andElectronic
StructureofGraphene
Nanoribbons under an Electric
Field

Y. Okada, Univ. of Tokyo, Japan

A. Uesugi, Y. Hirai, T. Tsuchiya and O.
Tabata, Kyoto Univ., Japan

6A-5-2
11:15
High-Aspect-Ratio
MicroFabrication by Proton Beam
Writing (Invited)

H. Nishikawa 1, Y. Ishii 2 and T.
Kamiya 2, 1 Shibaura Inst. Technol.
and 2 JAEA, Japan

6A-5-3
11:45
Fabrication of High Resolution
Seamless Roller Mold using Fast
EB Lithography (rEBL) for R2R
Process (Invited)

M. Abe 1, T. Kitada 1, N. Ito 1, M. Ataka2, T. Kishiro 2 and S. Matsui 3, 1 Asahi
Kasei, 2 Holon and 3 Univ. of Hyogo,
Japan

C.-J. Lee, C.-H. Won, M. Bae, J.-H. Lee,
J.-K. Shin and S.-H. Hahm, Kyungpook
Natl. Univ., Korea

Y.-R. Li, C.-Y. Wan, C.-T. Chang, Y.C.Huang, C.-H. Chou, K.-Y. Wang and
H.-C. Cheng, Natl. Chiao Tung Univ.,
Taiwan-3-

K. Iwanabe, T. Shuto, R. Takigawa andT. Asano, Kyushu Univ., Japan

S. Shibata 1, S. Amaya 2, S. Sugiyama
1 and T. Ando 1, 1 Ritsumeikan Univ.
and 2 Towa, Japan

R. Negishi 1, M. Matsuzaki 1, M.
Akabori 2, S. Yamada 2 and Y.
Kobayashi 1, 1 Osaka Univ. and 2
JAIST, Japan

H.-G. Cha 1, C.-J. Lee 1, Y.-S. Koo 1,
S.-B. Kang 1, S.-K. Hong 2 and B.-J.
Cho 2, J.H. Lee 1 and S.-H. Hahm 1,
1 Kyungpook Natl. Univ. and 2 KAIST,Korea

A. Yamanaka 1 and S. Okada 1,2, 1
Univ. of Tsukuba and 2 JST-CREST,Japan

MNC 2014, November 4-7, 2014, Hilton Fukuoka Sea Hawk, Fukuoka, Japan
6A-5 Author's Interview:
12:15-12:25

6B-5-4
11:50
Optical Properties of ZnTe/ZnMgTe
Multiple Quantum Wells for
Optoelectronic Device Applications
T. Tanaka 1,2, H. Ohshita 1, K. Saito 1,
Q. Guo1 and M. Nishio 1, 1 Saga Univ.
and 2 JST-PRESTO, Japan

6B-5 Author's Interview:
12:10-12:25

6C-5-4
11:35
Two
Dimensionally
Arrayed
Piezoelectric Squeeze Mode
Inkjet Head for High Viscosity Ink
Ejection

R. Kashu, N. Sasagawa, Y. Nakamura,
H. Osawa, S. Wang, T.Suzuki, T.
Nakakubo, Y. Kodera and A. Saito,
Canon, Japan

6D-5-4
11:35
Large
Area
Synthesisof
Hexagonal Boron Nitride (hBN)on Cu Foil by AtmosphericPressure
Chemical
Vapor
Deposition (APCVD)

S. Sharma, G. Kalita and M.
Tanemura, Nagoya Inst. of Technol.,Japan

6C-5-5
11:55
A MEMS Energy Harvesting
Device for Integrated CMOSMEMS Technology

6D-5-5
11:55
Water Encapsulation in a SingleWalled Carbon Nanotube

6C-4 Author's Interview:
12:15-12:25

6D-5 Author's Interview:
12:15-12:25
Room D (Boardroom, 3F)
6D-6: BioMEMS, Lab on a Chip
II (13:20-15:30)
M. Tokeshi (Hokkaido Univ.)
Y. Murakami (Toyohashi Univ. ofTechnol.)
6D-6-1
13:20
Microfluidic Technologies for Celland Tissue Analyses(Invited)

T. Matsushima 1, T. Konishi 1, D.
Yamane 2, H. Toshiyoshi 3, K. Masu 2
and K. Machida 1,2, 1 NTT-AT, 2 Tokyo
Inst. of Technol. and 3 Univ. of Tokyo,
Japan

S. Chiashi 1,2, T. Hanashima 1, R.
Mitobe 1, K. Nagatsu 1, T. Yamamoto
1 and Y. Homma 1, 1 Tokyo Univ. ofSci. and 2 Univ. of Tokyo, Japan

Lunch
Room A (Vega, 3F)
6A-6: Nanofabrication II (13:4015:30)
K. Makihara (Nagoya Univ.)
T. Hasegawa (NIMS)

Room B (Rigel, 3F)
6B-6: Inorganic Nanomaterials(13:40-15:20)
T. Ohno (Tohoku Univ.)
T. Higuchi (Tokyo Univ. of Sci.)

Room C (Chapel, 3F)
6C-6: Nano Tool (13:20-15:30)
O. Kubo (Osaka Univ.)
T. Hoshino (Univ. of Tokyo)

6A-6-1
13:40
Microwave Anneal Processing for
Future CMOS (Invited)

6B-6-1
13:40
Photoluminescence and Local
Structure Analyses of Nd-Doped
TiO2 with Al Co-Doping

6C-6-1
13:20
Micro/Nanomechanical Systems
As a Sensing Tool (Invited)

6A-6-2
14:10
Fabrication, Characterization, andElectrochemical Properties ofElectrospun
Ag-MnxOy/CNFs
Composite Nanofibers

6B-6-2
14:00
Visible Light Detection Using GLAD
TiO2 Nanowire Arrays

6C-6-2
13:50
Study of Viscous Deformation of
SiO2 by Nanoscale Tensile Testunder In-Situ Observation

6A-6-3
14:30
Hydrogen Injection Effect on the
Current – Voltage Characteristics
of Resistive Change Memory with
Nano Peak Structure

6B-6-3
14:20
Selective-Area
Metal-Organic
Vapor Phase Epitaxy of HeteroJunction
Nanowires
betweenFerromagnetic
MnAs
and
Semiconducting InAs

6C-6-3
14:10
Development of Compact 4 Probe
AFM/KFM for Investigation ofElectrical Property in Nanoscale

6A-6-4
14:50
Fabrication of GaAs/AlAs MicroPillar Cavities Including Lowdensity InAs Quantum Dots and
TheirPhotoluminescence
Properties

6B-6-4 Withdrawn (Nov. 3)
14:40
OpticalProperties
ofOrganic/Inorganic
HybridPassivation Layer for Flexible
OLEDs Lighting Films

6C-6-414:30
HighlySensitive
ThermalMicrosensor with pn Junction for
Thermal Measurements of aSingle Cell

6D-6-4
14:30
Hollow MEMS Plate Resonators
for Mass Sensing in Liquid with
Sub-ppm Frequency Stability inAir

6A-6-5
15:10
Impactof
Post-Oxidation
Annealing of Si Nanowire on Its Ni
Silicidation Rate

6B-6-5
15:00
First-Principles
Simulationon
Diameter
DependenceofPiezoproperties in Zinc Oxide
Nanowires

6C-6-5
14:50
Contraction and Condensation ofProtein Molecule by ElectricallyInduced
Bubblesfor
Crystallization

6D-6-5
14:50
Micropore
Channel
Based
Simultaneous Electrical and
Optical Detection

Y.-J. Lee 1, S.-S. Chuang 2, T.-C. Cho
2, P.-J. Sung 1,2, F.-K. Hsueh 1,2, T.S. Chao 2 and T.-Y. Tseng 2, 1 Natl.
Nano Device Labs. and 2 Natl. ChiaoTung Univ., Taiwan

T. Sinprachim and S. Maensiri,
Suranaree Univ. of Technol., Thailand

Y. Tanimoto 1, S. Otsuka 2, T. Shimizu
2, S. Shingubara 2 and K. Takase 1, 1
Nihon Univ. and 2 Kansai Univ., Japan

H. Yamashita, Y. Takahashi and K.
Yamaguchi,
Univ.
ofElectroCommunications, Japan

S. Hashimoto 1, H. Kosugiyama 1, K.
Takei 1, J. Sun 1, R. Imai 2, H.
Tokutake 2, M. Tomita 2, A. Ogura 2, T.
Matsukawa 3, M. Masahara 3 and T.
Watanabe 1, 1 Waseda Univ., 2 Meiji
Univ. and 3 AIST, Japan

T. Ono, Tohoku Univ., JapanT. Fujii, Univ. of Tokyo, JapanY. Aizawa 1, Y. Yanagida 1, S. Komuro 2,
N. Hirao 3 and X. Zhao 1, 1 Tokyo Univ.
of Sci., 2 Toyo Univ. and 3 JAEA, Japan

P. Chinnamuthu 1,2, A. Mondal 1, J.C.
Dhar 1 and N.K. Singh 1, 1 Natl. Inst. ofTechnol. Agartala, India and 2 NIMS,
Japan

R. Kodaira, H. Fujimagari, H. Kato, S.
Sakita and S. Hara, Hokkaido Univ.,
Japan

J.H. Lee and B.H. Choi, Korea Inst. ofTechnol., Korea

K. Nakamura 1,2, 1 Kyoto Univ., Japanand 2 Egypt-Japan Univ. of Sci. andTechnol., Egypt-4-

Y. Takayama 1, T. Ishida 2, T. Sato 1,
L. Jalabert 1 and H. Fujita 1, 1 Univ. ofTokyo and 2 Tokyo Inst. of Technol.,Japan

Y. Shingaya 1, D. Miao 2, J. Xu 1, R.
Creasey 1, M. Aono 1 and T.
Nakayama 1,2, 1 NIMS and 2 Univ. of
Tsukuba, JapanT. Yamada, N. Inomata and T. Ono,
Tohoku Univ., Japan

S. Takasawa 1, H. Kamegawa 1, S.
Hosoda 1 and Y. Yamanishi 1,2, 1
Shibaura Inst. of Technol. and 2 JSTPRESTO, Japan

6D-6-2
13:50
Multicolor
Fluorescence
Microscopic Imaging of Tumor
Cells
EnhancedwiththePlasmonic Chip
K. Tawa, C. Sasakawa, I. Shibata, S.
Yamamura and M. Kataoka, AIST,Japan

6D-6-3
14:10
ImprovementofPneumatic
Micropump for High Performance
LEP-OES Elemental Analyzer
with Preconcentrator

D.V. Khoai 1, T. Yamamoto 2 and Y.
Takamura 1, 1 JAIST and 2 Micro
Emission, Japan

C. Berthet, C. Hadji, F. Baléras, M.
Cochet, B. Icard and V. Agache, CEA
Léti, France

H. Yasaki 1, T. Yasui 1, S. Rahong 1,
T. Yanagida 2, N. Kaji 1, M. Kanai 2, K.
Nagashima 2, T. Kawai 2 and Y. Baba
1, 1 Nagoya Univ. and 2 Osaka Univ.,Japan

MNC 2014, November 4-7, 2014, Hilton Fukuoka Sea Hawk, Fukuoka, Japan
6C-6-6
15:10
Surface-Enhanced
Raman
Spectroscopy Analysis Using
Micro/Nanofluidic Devices withGold
Nanoparticle-Embedded
Nanochannels

K. Sugano, K. Suekuni, T. Takeshita
and Y. Isono, Kobe Univ., Japan

6A-6 Author's Interview:
15:30-15:40

6B-6 Author's Interview:
6C-6 Author's Interview:
15:20-15:30
15:30-15:40
Garden Lobby (3F)

6D-6-6
15:10
Electrophysiological Analysis ofSingle Neurons in Genetically
Micropatterned
Constructive
Neuronal Networks
H. Terazono 1,2, H. Kim 2, K.
Matsuura 2, H. Takei 1,3, A. Hattori 2
and K. Yasuda 1,2, 1 Tokyo Medical
and Dental Univ., 2 Kanagawa
Academy of Sci. and Technol. and 3
Toyo Univ., Japan

6D-6 Author's Interview:
15:30-15:40

Coffee BreakRoom P （Argos D, 1F）

6P-7: 15:40-17:40 POSTER SESSION I
Advanced Photolithography
Chairpersons: J. Miyazaki (ASML) and K. Oyama (Tokyo Electron)
6P-7-1
6P-7-2
Waveguide Effect in High-NA The Suggestion of Half-Tone
EUV Lithography: the Key to Phase-Shift Mask for High-NA
Extending EUV Lithography to Extreme Ultraviolet Lithography
The 4-nm NodeS. Hong, J.U. Lee, S.M. Lee, J.H. Kim,
M. Yeung 1 and E. Barouch 2, 1
Fastlitho and 2 Boston Univ., USA

J.S. Kim, H.M. Song and J. Ahn,
Hanyang Univ., Korea

6P-7-3
Pattern Defect Observation Result
Using
Coherent
EUV
Scatterometry Microscope with
High-Harmonic-Generation EUV
SourceT. Fujino 1, Y. Tanaka 1, T. Harada 1, Y.
Nagata 2, T. Watanabe 1 and H.
Kinoshita 1, 1 Univ. of Hyogo and 2
RIKEN, Japan

6P-7-4
Advanced
Excimer
Laser
Technologies Enable Green
Semiconductor Manufacturing

Y. Yoo, H. Fukuda, Y. Minegishi, N.
Hisanaga and T. Enami, Gigaphoton,Japan

6P-7-5
Shift-Mask Method for Sub-100
nm
Nanowire
with
I-LineLithography

C.-H. Chou, I.-C. Lee, C.-L. Wang, P.Y. Yang, W.-S. Chang, C.-Y. Liao and
H.-C. Cheng, Natl. Chiao Tung Univ.,
TaiwanElectron and Ion Beam Technologies
Chairpersons: H. Yamashita (NuflareTechnol.) and J. Yanagisawa (Univ. of Shiga Pref.)6P-7-6
6P-7-7
6P-7-8Renovation of Three-Dimensional Elastic Effect in Resist Shrinkage Design and Optimization of an
Electron
Beam
Lithography InducedbyElectron-Beam Electron-Optical System with a
System for Improvement of Irradiation
Ball-Tip Emission Source for
Positioning
Accuracy
and T. Ohashi 1, S. Hotta 1, A. Yamaguchi 1, Multiple-Rlectron-Beam–DirectReduction of Turnaround Time
J. Tanaka 1 and H. Kawada 2, 1 Hitachi Write Lithography
K. Yamazaki and H. Yamaguchi, NTT,Japan

and 2 Hitachi High-Technologies, Japan

H.-P. Lee, S.-Y. Chen, C.-H. Liu, S.-Y.
Ma, Y.-Y. Yang and K.-Y. Tsai, Natl.
Taiwan Univ., Taiwan

6P-7-10Control of Size and Shape of
Nano-Porous Structure Formedon Ge (110) Surface by HighEnergy Focused Ga Ion Beam
Irradiation

6P-7-11
Asymmetric Y-Shape Field Plates
with
Short
Foot
in
PMMA/Copolymer Bilayer for GaN
Based HEMTs by 3D Electron
Beam Lithography

6P-7-12Functional Pattern Formation on ILine Resist Film by Hybrid
Lithography Utilizing Electron
Beam and I-Line Optical Sources

M. Yamada and J. Yanagisawa, Univ.
of Shiga Pref., Japan

J. Shao 1, J. Liu 1, S. Zhang 1, N.
Taksatorn 2, W. Lu 3 and Y. Chen 1, 1
Fudan Univ., China, 2 GenISys,
Germany and 3 Ohio State Univ., USA

6P-7-101L
High Speed Preparation of Large
Size TEM Sample by Xe FIB.

O. Salord 1, E. Camescasse 1, A.
Delobbe 1, T. Hrncir 2, A. David 3, P.
Sudraud 1 and F. Lopour 2, 1 Orsay
Physics, 2 TESCAN Brno and 3
Biophy Res., France-5-

H. Nakano and A. Kawai, Nagaoka
Univ. of Technol., Japan

6P-7-9
Molecular Dynamics Study on
Proximity Effects in Electron
Beam Lithography

K. Michishita, H. Hitomi, M. Yasuda, H.
Kawata and Y. Hirai, Osaka Pref.
Univ., Japan

6P-7-13
Focused Ion Beam Milling
Cultured Cells and Exposing the
Cross Section

P.-K. Lin 1,2,3, M.-J. Sui 2,3, H.-M.
Chen 1 and C.-H. Kuan 1, 1 Natl.
Taiwan Univ., 2 Natl. Yang Ming Univ.
and 3 Taipei Veterans General
Hospital, Taiwan

MNC 2014, November 4-7, 2014, Hilton Fukuoka Sea Hawk, Fukuoka, Japan

Nanocarbons
Chairpersons: K. Hirahara (Osaka Univ.) and S. Okada (Univ. of Tsukuba)
6P-7-14
6P-7-15
6P-7-16
Electron Transport in Graphene Preparation & Electrochemical DesignofHigh-strength
FETs with Small Spatial Variation Characteristic of Pd-Decorated Recyclable Graphene Oxideof One-Dimensional Local Strain
Graphene
Based Porous Composite for the
H. Tomori, R. Hiraide, H. Tanaka, K. J.D. Kim and H.C. Choi, Chonnam Natl. Removal of Dyes
C. Jiao, J. Xiong, J. Tao, Y. Chen and
H. Lin, Soochow Univ., China

Katakura, Y. Itou, Y. Ootuka and A.
Kanda, Univ. of Tsukuba, Japan

Univ., Korea

6P-7-18
Laser Micromachining of ScreenPrinted Multilayer Graphene forElectrode Structures

6P-7-19
Printed SWCNT Thin-Film CMOS
Inverters Based on Ion-gel
Chemical Doping

C.-F. Chang 1, T.-L. Chang 1, Y.-W.
Lee 2, S.-F. Tseng 3 and H.-C. Huang
1, 1 Natl. Taiwan Normal Univ., 2 Natl.
Defense Univ. and 3 Natl. Applied Res.
Labs., Taiwan

Y. Wada 1, R. Inukai 1, T. Fujimoto 1, H.
Hamahata1, S. Matsuzaki 1, K. Yanagi 2
and T. Takenobu 1, 1 Waseda Univ. and
2 Tokyo Metropolitan Univ., Japan

6P-7-20
Threshold Voltage Variation for
Charge Accumulation in CNT DuetotheMonatomic
DefectArrangement
Y. Ishiyama and S. Okada, Univ. of
Tsukuba, Japan

6P-7-23
AFM Local Anodic Oxidation andTheoretical
Decomposition
Voltages of Few/Multi Layer
Graphene

6P-7-24Structures and Electronic Statesof the Radicals Adsorbed on
Graphene

6P-7-26 Withdrawn
Development of New Simulation
Methodfor
ThermoelectricResponses and Its Application to
Nanocarbon Materials

6P-7-27
Fabricated Flexible Sensors for
Monitoring
Compartment
Syndrome

6P-7-28
Nano-Saturn : Theoretical Designof New C60 Inclusion Compounds

6P-7-30
Polydopamine-Based
CarbonCoating on Cu Particles for
Oxidation-Resistive Cu Ink

6P-7-102L
Reduction of Sheet Resistance inGraphene Conductive Film with
Carbon Nanotubes

Y. Takada 1 and T. Yamamoto 2, 1
Aoyama Gakuin Univ. and 2 Tokyo
Univ. of Sci., Japan

W. Lee and J.U. Lee, KIMS, Korea

H. Tachikawa, Hokkaido Univ., JapanK. Uki, M. Kato, M. Nishimura and X.
Zhao, Tokyo Univ. of Sci., Japan

Z.-W. Liu, F.-Y. Chang, L.-C. Chen and
P.-T. Teng, Taiwan Univ. of Sci. andTechnol., Taiwan

J.U. Lee, W. Lee and J.-H. Byun,
KIMS, Korea

6P-7-21
TuningofThermoelectric
Properties of Semiconducting
Single Wall Carbon Nanotube
Networks by Electric Double
Layers Techniques Using Ionic
LiquidK. Yanagi, S. Kanda, Y. Oshima, Y.
Kitamura, H. Kawai, Y. Nakai and Y.
Maniwa, Tokyo Metropolitan Univ.,
Japan

6P-7-22
ImprovementofLiquidCrystallinity of Giant Graphene
Oxide Solution by Fluorine
Functionalization
K.E. Lee, J.U. Lee and W. Lee, KIMS,
Korea

6P-7-17
Decoration of Graphene Sheetswith Gold Nanoparticles and Its
Use for Efficient SurfaceEnhanced Raman Scattering
Platform

6P-7-25
Electrical Detection of Lectin
Using Glycan-Modified Graphene
Field-Effect Transistors for Highly
Sensitive Influenza Virus Sensor

T. Oe 1, Y. Kanai 1, Y. Ohno 1, K.
Maehashi 1, K. Inoue 1, K. Matsumoto
1, Y. Watanabe 1, T. Kawahara 2, Y.
Suzuki 2 and S. Nakakita 3, 1 Osaka
Univ, 2 Chubu Univ. and 3 Kagawa
Univ., Japan

S. Kigure 1 and S. Okada 1,2, 1 Univ.
of Tsukuba and 2 JST-CREST, Japan

6P-7-29
Geometric
andElectronic
Structures of Polymerized C32
Fullerene
M. Maruyama 1 and S. Okada 1,2, 1
Univ. of Tsukuba and 2 JST-CREST,Japan

T. Ikuta, Y. Kanai, Y. Ohno, K. Maehashi,
K. Inoue and K. Matsumoto, Osaka
Univ., Japan

Nanofabrication
Chairpersons: K. Takase (Nihon Univ.) and K. Tomioka (Hokkaido Univ.)
6P-7-31
6P-7-32
Silk Fibroin Silver Nanoparticles Routes
toProbePhononHybrid Functional Cotton Fabric: Confinement Effect in a Single NonFabrication and Its Property
Polar a-Plane ZnO Nanowire
S. Chen, C. Li, H. Lin and Y. Chen,
Soochow Univ., China

P.-H. Shih, S.S. Gaikwad and S.Y. Wu,
Natl. Dong Hwa Univ., Taiwan

6P-7-35
Greatly
Improved
ColossalDielectric Properties of Mg-Doped
La1.7Sr0.3NiO4Ceramics
Fabricatedby
Using
Nanocrystalline Powders

6P-7-36
Effect of Seed Layers on Structureof Self-organized Ag Nanodots on
MgO Substrates

6P-7-39
Effect of Cations Distribution on
Magnetic Properties of Co1Nanoparticles
XNixFe2O4
Investigated by EXAFS Analysis

6P-7-40
Linearly Growth of Multi Wall
Carbon Nanorod and It's Focused
Ion Beam Processing

K. Meeporn 1, T. Yamwong 2 and P.
Thongbai 1, 1 Khon Kaen Univ., 2
MTEC, Thailand

U. Wongpratat 1, S. Maensiri 2 and E.
Swatsitang 1, 1 Khon Kaen Univ. and
2 Suranaree Univ., Thailand

M. Kamiko 1, R. Suenaga 2, J.-W. Koo
3, K. Nose 1, K. Kyuno 2, Y. Mitsuda 1
and J.-G. Ha 3, 1 Univ. of Tokyo, 2
Shibaura Inst. of Technol., Japan and 3
Kwangwoon Univ., Korea

S. Arai, K. Chujo, S. Kurumi, K.-I.
Mastuda and K. Suzuki, Nihon Univ.,
Japan

6P-7-104L
Subwavelength Structures on
Glass and GaN Substrates by
Self-Masked Dry Etch Process for
Advanced Optical Devices
Y.M. Song 1, E.K. Kang 2, E. Kwon 2,
H.G. Park 1, J.W. Min 2, and Y.T. Lee
2, 1 Pusan Natl. Univ., 2 Gwangju Inst.
of Sci. and Technol., Korea-6-

6P-7-33
Atomic Layer Deposition with
Rotary Reactor for Fabrication of
Core@Shell Nano-Composites

6P-7-34
Dry Etching of 4H-SiC Using
Ar/F2 Plasma

6P-7-37
Synthesis and Engineering ofGraphene Oxide @ Silk Fibers
Composites
withEnhanced
Uvioresistant Properties

6P-7-38
Seed/Catalyst-Free Growth ofZinc Oxide on Graphene by
Thermal Evaporation: Effects ofSubstrate Inclination Angles andGraphene Thicknesses

S. Seong, Y.C. Jung, T. Lee, I.-S. Parkand J. Ahn, Hanyang Univ., Korea

J. Song 1,2, S. Xu 1, T. Chen 2, L. Li 2,
Y. Tamada 1 and H. Morikawa 1, 1
Shinshu Univ., Japan and 2 Jiangsu
Univ., China

6P-7-41
Effect of Thickness and Sputtering
Pressure on the Structural and
Optical Properties of ZnO Films
Deposited by Sputtering Method

L.M. Li, A. Manie, F.L. Shain, S. Sallehand A. Alias, Univ. Malaysia Sabah,
Malaysia

A. Matsutani and F. Koyama, Tokyo
Inst. of Technol., Japan

N.F. Ahmad 1, K.Yasui 2 and A.M.
Hashim 1, 1 Univ. Teknologi Malaysia
and 2 Nagaoka Univ. of Technol.,Japan

6P-7-103L
TiO2 Nanorods/Graphene/FTO
Photo-Anode for Solar Hydrogen
Production

H. Kim, S.W. Park, G.W. Lee, J.S.
Choi, S.J. An and B.L. Yang, Kumoh
Natl. Inst. of Technol., Korea

MNC 2014, November 4-7, 2014, Hilton Fukuoka Sea Hawk, Fukuoka, Japan
Inorganic Nanomaterials
Chairpersons: X.W. Zhao (Tokyo Univ. of Sci.) and T. Ohno (Tohoku Univ.)
6P-7-42 Withdrawn
6P-7-43
6P-7-44
Effect of Hydrolysis and Dopant Fabrication and Magneto-optical HBP-NH2 Coated TiO2 NPs:
Concentrationon
the PropertiesofPerpendicular Preparation,
Characterization,
Characterization of Titanium- Magnetic CoPt Nanostructures andTheirEnhanced
Doped
Zinc
Aluminate Formed by Surface Agglomeration Photocatalytic Activities
Nanocrystalsof Ag
W. Zhang 1, H. Lin 1, S. Xu 2, Y. Chen

6P-7-45
Electronic Structure and Oxygen
Ion Conductivity of As-Deposited
Ce0.90Sm0.10O2-δ
Thin
Film
Prepared by RF Magnetron
Sputtering

M.-T. Tsai, B.-J. Lin and C.-W. Chen,
Natl. Formosa Univ., Taiwan

H. Yamane 1, K. Takeda 2 and M.
Kobayashi 2, 1 Akita Industrial Technol.
Ctr. and 2 Chiba Inst. of Technol., Japan

1, C. Jiao 1, J. Xiong 1 and D. Zhang
1, 1 Soochow Univ., China and 2
Shinshu Univ., Japan

6P-7-46
Electrical Characteristic of AllSolid-State Electric-Double-Layer
Transistor Achieved by YttriaStabilized
Zirconia
ProtonConductor and SrTiO3 Single
Crystal

6P-7-47
Heat Generation Properties in AC
Magnetic Field for Fine MgAlXFe2XO4 Ferrite Powder Prepared by
Beads Milling

6P-7-48
Mg-Doped
CaCu3Ti4O12
Nanocrystalline
Powders
Prepared by a Modified Sol-Gel
Method:Preparation,
Characterization, and Their GiantDielectric Response

6P-7-49
Mn2+ and Oxygen VacancyInduced Room Temperature
Ferromagnetism in Magnetron
Sputtering Prepared ZnO: Mn
Thin Films

6P-7-50Comparisonof
Insulation
Characterization of Al2O3 Film
Made by Atomic Layer Deposition

6P-7-51
Raman Study of Strain
Semiconductor Nanostructures

6P-7-52
Heteroepitaxial
GrowthofNonpolar ZnO Thin Film on Si
Substrate Using MnS Buffer Layer

6P-7-53
Dielectric
Nanowire-Polymer
Composite Layers for Flexible
Capacitive Pressure Sensors

6P-7-54
Influenceof
Deposition
Temperature on the ZrO2 Thin
Films by Electrostatic Spray
Deposition Using a Zirconatrane
Precursor and Alcohol Sensing
Properties

6P-7-55
Synthesis and Optical Properties ofβ-Ga2O3 Nanorods by a Simple andCost Effective Route Using Egg
White Solution

6P-7-105L
Variable-Range-Hopping
Conduction in Atomically Thin BiSr-Co-O Nanosheets

6P-7-106L
High Heat Generation Ability in an
AC Magnetic Field of Nano-Sized
Y3Fe5O12 with Lanthanum 0.3mol
Added Powder Prepared by
Bead-Milling

6P-7-107L
Facile Synthesis of Fe3O4
Nanoparticles Through Thermal
Decomposition
and
Their
ApplicationinLithium-Ion
Batteries

6P-7-108L
Mn2+ and Oxygen Vacancy-Induced
Room
Temperature
Ferromagnetism in Magnetron
Sputtering Prepared ZnO:Mn Thin
Films

M. Ochi 1,2 , T. Tsuchiya 1 , K.
Kobayashi 1 T. Higuchi 2 and K.
Terabe 1, 1 NIMS and 2 Tokyo Univ. of
Sci., Japan

Y. Nozaki, T. Sekiguchi, A. Hiraiwa and
H. Kawarada, Waseda Univ., Japan

G. Poungchan 1,2, M. Panapoy 1,2
and B. Ksapabutr 1,2, 1 Silpakorn
Univ. and 2 Chulalongkorn Univ.,
ThailandX. Cheng, P. Yang, Z. Ye and Q. Che,
Univ. of Jinan, China

K. Naganuma 1, H. Hirazawa 1, H. Aono
2, T. Naohara 2, T. Maehara 2 and Y.
Watanabe 2, 1 Niihama College and 2
Ehime Univ., Japanin

H. Rho 1 and J.-G. Park 2, 1 Chonbuk
Natl. Univ. and 2 KIST, Korea

S. Phumying 1, S. Labauyai 2, W.
Chareonboon 2 and S. Maensiri 1, 1
Suranaree Univ. of Technol. and 2 Khon
Kaen Univ., Thailand

J. Boonlakhorn and P. Thongbai, Khon
Kaen Univ., Thailand

T. Nakamura 1, N. Nguyen 1, T.
Nagata 1, K. Takahashi 2, S.-G. Ri 2,
K. Ishibashi 2, S. Suzuki 2 and T.
Chikyow 1, 1 NIMS and 2 COMET,Japan

Y. Wang, Y. Sui and X. Wang, Harbin
Inst. of Technol., China

S. Yamaguchi 1, T. Higuchi 1, M.
Kobayashi 2, K. Horiba 2 and H.
Kumigashira 2, 1 Tokyo Univ. of Sci.
and 2 KEK, JapanY. Zhang, J. Okamoto, N. Nasu and X.
Zhao, Tokyo Univ. of Sci., Japan

G.-W. Hsieh, Y.-S. Chen, S.-P. Chen
and P.-Y. Tseng, Natl. Chiao Tung
Univ., Taiwan

S. Yoshikawa 1, H. Hirazawa 2, H.
Aono 1, T. Naohara 1, T. Maehara 1
and Y. Watanabe 1, 1 Ehime Univ. and2 Niihama College, JapanY. Zhang, J. Okamoto, N. Nasu and X.W.
Zhao, Tokyo Univ. of Sci., Japan

BioMEMS, Lab on a Chip
Chairpersons: M. Tokeshi (Hokkaido Univ.) and H. Hisamoto (Osaka Pref. Univ.)
6P-7-56
6P-7-57
6P-7-58
Immuno-Wall Devices - Structural Systematic Study of Amino- Programmable
Graphene
Optimization of Immuno-Pillar Termination of Glass Surfaces Biosensor
Device for Simplifing Washing Using Water Solvent
S. Arpiainen 1, M. Soikkeli 1, K.
and Measurement Procedures
H. Kuramochi, A. Ono, S. Ueno and T. Kurppa 1, M. Kainlauri 1, D.
T. Kasama 1,2, Y. Hasegawa 2,3, H.
Kondo 2,3, T. Ozawa 2,3, N. Kaji 1,2,
M. Tokeshi 2,4 and Y. Baba 1,2,5, 1
Nagoya Univ., 2 The Priority Res.
Project, 3 Hamamatsu Photonics, 4Hokkaido Univ. and 5 AIST, Japan

Ichiki, Univ. of Tokyo, Japan

Gunnarsson 1, J.J. Joensuu 1, P.
Laaksonen 2, M. Prunnila 1, M.B.
Linder 2 and J. Ahopelto 1, 1 VTT
Technical Res. Ctr. of Finland and 2
Aalto Univ., Finland

6P-7-59
Control the Formation of MicroDroplets with Homogenous Sizein On-Chip Microfluidics System:
A Pressure-Controlled Approach

6P-7-60
Indium-Tin Oxide Based Chip for
Optical and Electrochemical
Characterization of Protein-Cell
Interaction

6P-7-61
Zero Dimensional Ion-Sensitive
Field-Effect Transistors

6P-7-62
DuaL
Side
Simultaneous
Photolithography for Cylindrical
Substrate by Using Space
Division Type Exposure

6P-7-63
Development of the ShapeMemory Polymer Mirovalve
Integratable into Plastic-Based
Microfluidic Devices

6P-7-64
An Extended-Gate AlGaN/GaN
High Electron Mobility TransistorType Biosensor for Detection ofProtein Molecules

6P-7-65
OpticalandElectrical
Characterization of Effect ofHydrogen Peroxide on Cell
Behaviors Using Indium Tin Oxide
Based Cell Chip

6P-7-66
High-Throughput
Nano-droplet
Array Polymerase Chain Reaction
System
with
Fast
and
Homogeneous
Temperature
Control for 24/96/384 Sample
Plate

6P-7-67
Immuno-Wall Devices for Easyto-Use and Highly Sensitive
Detection of Disease Markers

Y.H. Choi 1, J. Min 2 and S. Cho 1, 1
Gachon Univ. and 2 Chung-Ang Univ.,
Korea

H.H. Lee, S. Kim, C.-H. Won, J.-H.
Lee, P. Choi and J.-K. Shin,
Kyungpook Natl. Univ., Korea

R. Sivakumarasamy 1, K. Nishiguchi 2,
A. Fujiwara 2, D. Vuillaume 1 and N.
Clément 1, 1 IEMN-CNRS, France and
2 NTT, Japan

Y.H. Choi 1, J.-C. Pyun 2, J. Kim 1 and
S. Cho 1, 1 Gachon Univ. and 2 Yonsei
Univ., Korea-7-

D. Kubota and S. Nagasawa, Sibaura
Inst. of Technol., JapanK. Matsuura 1, H. Terazono 2, H. Kim
1, A. Hattori 1 , F. Nomura 2 and K.
Yasuda 1,2, 1 Kanagawa Academy of
Sci. and Technol. and 2 Tokyo Medical
and Dental Univ., Japan

M. Girault 1, A. Hattori 1, H. Kim 1, S.
Kawada 2, K. Matsuura 1, M. Odaka
1, H. Terazono 1,2 and K. Yasuda 1,2,
1 Kanagawa Academy of Sci. andTechnol. and 2 Tokyo Medical and
Dental Univ., Japan

C. Jiang 1, K. Uto 2, M. Ebara 2, T.
Aoyagi 2 and T. Ichiki 1, 1 Univ. ofTokyo and 2 NIMS, Japan

N. Nishiwaki 1,3, T. Kasama 2,3, A.
Ishida 1, H. Tani 1, Y. Baba 2,3 and M.
Tokeshi 1,3, 1 Hokkaido Univ., 2
Nagoya Univ. and 3 The Priority Res.
Project, JapanMNC 2014, November 4-7, 2014, Hilton Fukuoka Sea Hawk, Fukuoka, Japan
6P-7-68
Development of the Algorithm for
Recognition and Identification of
Target Cells Using Imaging
Biomarkers for On-Chip MultiImaging Cell Sorter

6P-7-69
Silver-Film Thickness Dependenceof the Fluorescence Enhancement
Factor under the Back-Side
Irradiation for a Plasmonic Chip

6P-7-70
Development of a MicrochipBased Fluorescence Polarization
Immunoassay
Systemfor
Quantitative Analysis of Drugs

6P-7-71
The Effect of Cross-shaped
Microchannel Design on theMicroparticle Manipulation with
Thermal Bubble Actuation

6P-7-72
High-Contrast
Fluorescence
Imaging on a Plasmonic Chip with
theTransmitted
Light
Fluorescence Microscope

6P-7-73
Surface
Plasmon-Enhanced
Optical Tweezers of Cell Surface
Molecules on Neurons

6P-7-74
Sorting of Multiple-Size Cells
Using Spiral Microchannels

6P-7-75
Development of Robust andEasy-to-Fabricate
Micro-FreeFlow Electrophoresis Device

6P-7-76
Electrophysiological ImpedanceSpectrum
Analysisof
Cardiomyocytes Using On-Chip
Multimicroelectrode Impedance
Analyzer

6P-7-77
Evaluating Barrier Property of Cell
Membrane via Ammonia Diffusion
Using pH Sensor

6P-7-78
Optical Perturbation into Neuronal
Cells by a Focused Laser Beam

M. Odaka 1, H. Kim 1, M. Girault 1, A.
Hattori 1, H. Terazono 1,2, K.
Matsuura 1 and K. Yasuda 1,2, 1
Kanagawa Academy of Sci. andTechnol. and 2 Tokyo Medical and
Dental Univ., JapanT. Fujita 1,2, C. Hosokawa 1, J. Nishii
3, N. Kakinuma 4, M. Oike 4 and K.
Tawa 1,2, 1 AIST, 2 Kwansei Gakuin
Univ., 3 Hokkaido Univ. and 4 Seiko
Giken, Japan

F. Nomura, K. Matsuura, A. Hattori, H.
Kurotobi, H. Terazono and K. Yasuda,
Tokyo Medical and Dental Univ., Japan

T. Nakayama 1,2, K. Kintaka 1 and K.
Tawa 1,2, 1 AIST and 2 Kwansei Gakuin
Univ., Japan

K. Miyauchi 1,2, K. Tawa 1,2, S.N.
Kudoh 2, T. Taguchi 3 and C. Hosokawa
1,2, 1 AIST, 2 Kwansei Gakuin Univ. and
3 NICT, Japan

Y. Imaizumi, T. Goda, A. Matsumoto and
Y. Miyahara, Tokyo Medical and Dental
Univ., JapanK. Aoki 1, K. Oleg 2, A. Ishida 1, H. Tani
1, S. Eremin 2 and M. Tokeshi 1, 1
Hokkaido Univ., Japan and 2 M. V.
Lomonosov Moscow State Univ.,
RussiaA. Thanormsridetchai 1, D. Ketpun 1,
A. Pimpin 1, W. Srituravanich 1, P.
Piyaviriyakul 1, A. Sailasuta 1, W.
Jeamsaksiri 2, W. Sripumkhai 2, J.
Jantawong 2 and J. Supadech 2, 1
Chulalongkorn Univ. and 2 TMEC,
ThailandC. Hosokawa 1, N. Takeda 1,2, S.N.
Kudoh 2 and T. Taguchi 3, 1 AIST, 2
Kwansei Gakuin Univ. and 3 NICT,Japan

W. Li and C. Tsou, Feng Chia Univ.,
TaiwanR. Kubota, M. Kobayashi, T. Sakai andT. Ichiki, Univ. of Tokyo, Japan

6P-7-109L
DetectionofFluorescence
Molecule-DNA Binding Based on
a Graphene FET

M. Okano, S. Norhayati, V. Rajiv, Y.
Kanai, Y. Ohno, K. Maehashi, K.
Inoue, F. Takei, K. Nakatani and K.
Matsumoto, Osaka Univ., Japan

6P-7-110L
Fabrication of a Hydrophilic
Poly(Dimethylsiloxane)
withWrinklingSurface
Using
Repeated
ThermalCuringProcesses and Its Application
C.K. Oh, W.H. Jeong and O.C. Jeong,
Inje Univ., Korea

Microsystem Technology and MEMS
Chairpersons: N. Miki (Keio Univ.) and T. Namazu (Univ. of Hyogo)
6P-7-79
6P-7-80
A Study on Notched Long-Period Fabrication of a MOSFET Using
Fiber Grating Sensor Fabricated Minimal and Mega Fab Hybrid
by ICP Dry Etching Process for Process
GlucoseConcentration S. Khumpuang 1,2, M. Nagao 1, T.
Measurement
Matsukawa 1, K. Endo 1, M. Masahara

6P-7-81
Optimization of Ferrofluid Motion
on Glass Substrate for the Optical
Mirror Applications

6P-7-82
Fabrication of a Paper-Based
Pressure Sensor by a Patterning
Method Using Water Mask

J.-W. Wu , C.C. Chiang and J.-Y. Hu,
Natl. Kaohsiung Univ. of Applied Sci.,
Taiwan1 and S. Hara 1,2, 1 AIST and 2 Minimal
Fab Res. Association, Japan

6P-7-83
Novel Technique for PDMS MicroPatterning Using Dry Etching and
Photolithography

6P-7-84
Multi-Pole Magnetic Gratings forHigh-Resolution
Positioning
Systems

6P-7-85
A Piezoelectric Energy Harvesting
Device Using Shell Structure for
MechanicalFrequency-Up
Conversion

6P-7-86
Design,Fabrication
andImplementation of Fluidic Control
Platform for Flip-chip LED
Packages

6P-7-89 Withdrawn
Performances and Limitations of a
Room Temperature and Ambient
Pressure HF Vapor Process in
The Release Etch of MEMS andNEMS Devices

6P-7-90
DirectPatterningofCu
Microstructures
Using
Femtosecond Laser Induced
CuO Nanoparticle Reduction

6P-7-93
Thermal Resistance Analysis ofSolder Joints Fabricated by SelfPropagating Exothermic Reaction

6P-7-94
Fabrication of MEMS Chamber
for SEM Observation Under
Controlled
Temperature
Condition

H.W. Kim 1, S.J. Bang 1, W.I. Jang
2 and S.H. Kong 1, 1 Kyungpook
Natl. Univ. and 2 Electronics andTelecommunications Res. Inst.,
Korea

6P-7-87
Toward Large Deflection of Light
Beam by Using Wide Bandwidth
Surface Acoustic Wave
H.S. Choi, T.Y. Lee and K.K. Lee, Ajou
Univ., Korea

6P-7-91
Expanded Cavity Size of RoomTemperature Hermetic Sealing
Using Au Compliant Rim forMicrosystem Packaging
R. Takigawa, H. Kawano, Y. Aoki, T.
Shuto, K. Iwanabe and T. Asano,
Kyushu Univ., Japan

Z.-H. Xu 1, B.-H. Tseng 2, C. Chang 2,
S.-C. Wang 3, T.-S. Chin 2 and C.-K.
Sung 1, 1 Natl. Tsing Hua Univ., 2 Feng
Chia Univ. and 3 Natl. United Univ.,
Taiwan6P-7-88
Enhanced
Photoresponseof
Terahertz Wave Detector Based on
Asymmetric Silicon MOSFETs with
Antenna Impedance Matching

M.W. Ryu 1, K.S. Kim 1, K. Park 1, J.-R.
Yang 2, S.-T. Han 2 and K.R. Kim 1, 1
UNIST and 2 KERI, Korea

6P-7-92
Development of Actuation System
for Artificial Cilia with Magnetic
Elastomer

A. Saijou, F. Tsumori, Y. Xu, T. Osadaand H. Miura, Kyushu Univ., Japan-8-

S. Yu and K.-S. Yun, Sogang Univ.,
Korea

S. Song, M. Jang, S. Kim and K.-S.
Yun, Sogang Univ., Korea

O. Pollet 1, R. Segaud 1, M. Silva
Bortolini de Castro 1,2, C. Ladner 1
and F.de Crecy 1, 1 Univ. Grenoble
Alpes, 2 CEA-LETI, France and 3
Centro Tecnológico do Exército, Brazil

S. Miyake 1, S. Kanetsuki 1, K. Morino
1, J. Kuroishi 2 and T. Namazu 2, 1
Kobelco Res. Inst. and 2 Univ. of
Hyogo, Japan

N. Jiranusornkul, S. Kraduangdej, N.
Niltawach, K. Punpattanakul, C.
Ratanasumawong, A. Pimpin and W.
Srituravanich, Chulalongkorn Univ.,
ThailandC.-H. Huang 1, Y.-W. Lee 2, T.-L.
Chang 1, C.-F. Chang 1 and J.-M. Miao
3, 1 Natl. Taiwan Normal Univ., 2 Natl.
Defense Univ. and 3 Natl. Pingtung
Univ. of Sci. and Technol., Taiwan

M. Mizoshiri, S. Arakane and S. Hata,
Nagoya Univ., Japan

K. Tani and T. Ando, Ritsumeikan
Univ., JapanMNC 2014, November 4-7, 2014, Hilton Fukuoka Sea Hawk, Fukuoka, Japan
6P-7-95
Evaluation on Single-Crystal
Silicon Cantilever-Type p-n Diode
Actuators
K. Kanaya, Y. Nakai, H. Tanigawa andK. Suzuki, Ritsumeikan Univ., Japan

6P-7-99
Deformation
Analysis
andFabricationof
Awl-Shaped
Serpentine Microspring

H.-M. Chou 1, M.-J. Lin 2 and R. Chen
1, 1 Natl. Tsing Hua Univ. and 2 Feng
Chia Univ., Taiwan

6P-7-96
Readability of Two Dimensional
Code Marks Printed Using Matrix
Arrays of Light Emitting Diodes andSquared Optical Fibers
J. Watanabe, K. Kato, J. Iwasaki and T.
Horiuchi, Tokyo Denki Univ., Japan

6P-7-100
Measurement Method for Output
Force of Inclined Ciliary SelfOscillating Gel Using a Micro
Cantilever

T. Kogure, R. Okada, S. Maeda and S.
Nagasawa, Shibaura Inst. of Technol.,Japan

6P-7-97
Formation of Electric andElectronic
Circuits
inThermoplastic Resin Substrate by
Laser-Assisted Micro Powder Jet
Implantation

K. Suzuki 1, T. Takahashi 1, D. Katoh
1, R. Watanabe 1, S. Kameya 1, K.
Miura 2, T. Yuzawa 3 and T.
Kuriyagawa 4, 1 Sendai Natl. College
of Technol., 2 Miura Sensor Res., 3
G.E.S and 4 Tohoku Univ., Japan

6P-7-111L
MEMS Acceleration Switchi with
Mechanical latching Function
Y. Lee 1, S.-M. Sim 1 H. Kim 2, Y.-K.
Kim 2 and J.-M. Kim, 1 Chonbuk Natl.
Univ. and 2 Seould Natl. Univ., Korea

Penthouse (34F)
18:00-20:00

Banquet-9-6P-7-98
Analysis of DC and RF
PerformancesonCurrent
Aperture
VerticalElectron
Transistor (CAVET) with MultiApertures Structure

H.S. Kang 1, Y.J. Kim 1, S.Y. Kim 1,
J.H. Seo 1, Y.J. Yoon 1, J.-H. Lee 1, S.
Cho 2 and I.M. Kang 1, 1 Kyungpook
Natl. Univ. and 2 Gachon Univ., Korea

MNC 2014, November 4-7, 2014, Hilton Fukuoka Sea Hawk, Fukuoka, Japan

Friday, November 7
Room A (Vega, 3F)
7A-8: Symp. A: Advanced
Patterning III (9:00-10:00)
S. Nagahara (Tokyo Electron)
K. Yoshimoto (Kyoto Univ.)
7A-8-1
9:00
A Foundry View of Where
Lithography is Going (Invited)
H. Levinson, Globalfoundries, USA

Room B (Rigel, 3F)
7B-8: Organic Nanomaterials(9:00-10:20)
H. Kasai (Tohoku Univ.)
Y. Masuhara (Yamagata Univ.)
7B-8-1
9:00
Solution
Processed
NanoColumnar Structure for Efficient
Small Molecule Organic Solar Cells
H. Tanaka, M. Oiki and E. Nakamura,
Univ. of Tokyo, Japan

7A-8-2
9:30
Advanced Lithography Materials
as Key Scaling Enablers (Invited)

G. Vandenberghe, D.D. Simone and
R. Gronheid, IMEC, Belgium

Room C (Chapel, 3F)
7C-8: Nanofabrication III (9:0010:20)
K. Takase (Nihon Univ.)
R. Hasunuma (Tsukuba Univ.)
7C-8-1
09:00
Femtosecond Laser Fabrication ofHybrid Plasmonic Nanostructures
H. Nishiyama andYamagata Univ., JapanY.

Ohzeki,Room D (Boardroom, 3F)
7D-8: Nanotube Application(9:00-10:30)
D. Kondo (Fujitsu Labs.)
S. Chiashi (Univ. of Tokyo)
7D-8-1
9:00
Optimization of Vertical Carbon
Nanotube Interconnects using the
Direct Electrical Comparison ofIntegration Steps (Invited)

M.H. van der Veen, Y. Barbarin, J.
Boemmels and Z. Tökei, IMEC,
Belgium

7B-8-2
9:20
Strongly Enhanced Dielectric
Permittivity
inThree-Phase
Nanocomposite of CaCu3Ti4O12Carbon Nanotubes/Polyvinylidene
Fluoride Films

7C-8-2
9:20
Nitridation of Si Surface at the
Bottom of Submicron Trench
Using Nitrogen Neutral Beam

7D-8-2
9:30
Printed
Top-Gate
CarbonNanotube Thin-Film Transistors
with Small Hysteresis

7B-8-3
9:40
Evaluation of Anti-Cancer Activities
and Hydrolysis Behavior of Drug
Nanoparticles

7C-8-3
9:40
Growth
of
Zinc
Oxide
NanostructuresonGraphene/GlassbyElectrochemical Deposition

7D-8-3
9:50
Improvement in the Photovoltaic
Performanceof
CarbonNanotube-Based Solar Cells
Using Metal Oxide Layers

7C-8-410:00
Development of Anti-Infrared
Moth-Eye Nanostructure by Using
Roll-to-Roll Technology

7D-8-4
10:10
Memory Operation of Carbon
NanotubeSingle-ElectronTransistors with Charge Storage
Structure

Y. Hara, T. Shimizu and S. Shingubara,
Kansai Univ., Japan

M. Maeda, K. Higuchi, S. Kishimoto
and Y. Ohno, Nagoya Univ., Japan

W. Tuichai 1, T. Yamwong 2, S.
Danwittayakul 2 and P. Thongbai 1, 1
Khon Kaen Univ. and 2 MTEC, Thailand

7A-8 Author's Interview:
11:45-11:55

Y. Ikuta, Y. Koseki, T. Onodera, H.
Oikawa and H. Kasai, Tohoku Univ.,
Japan

7B-8-4
10:00
A Composite Urea Biosensor
Based on Urease Immobilized on
TetracyanoquinodimethaneTetrathiafulvalene/PolyanilineCarbon Nanofiber Film

N.A. Hambali 1, H. Yahaya 1, M.R.
Mahmood 1, T. Terasako 2 and A.M.
Hashim 1, 1 UT Malaysia and 2 Ehime
Univ., Japan

C.-H. Liu, Z.-H. Xu, C.-K. Sung and C.Y. Lo, Natl. Tsing Hua Univ., Taiwan

G. Das, N.s. Nguyen, T.T. Pham and
H.H. Yoon, Gachon Univ., Korea

7B-8 Author's Interview:
7C-8 Author's Interview:
10:20-10:30
10:20-10:30
Garden Lobby (3F)

F. Wang 1, D. Kozawa 1, Y. Miyauchi
1,2, S. Mouri 1, Y. Ohno 3 and K.
Matsuda 1, 1 Kyoto Univ., 2 JSTPRESTO and 3 Nagoya Univ., Japan

K. Seike, Y. Kanai, Y. Ohno, K.
Maehashi, K. Inoue and K.
Matsumoto, Osaka Univ., Japan

7D-8 Author's Interview:
12:05-12:15

Coffee BreakRoom A (Vega, 3F)
7A-9: Symp. A: Advanced
Patterning IV (10:15-11:45)
T. Azuma (EIDEC)
T. Hirayama (Tokyo Ohka)
7A-9-110:15
300mm Wafer Performance of a
Coordinated Line Epitaxy (COOL)
Process Using Directed SelfAssembly (Invited)

Y. Seino, Y. Kasahara, H. Sato, H.
Kanai, K. Kobayashi, S. Minegishi, K.
Miyagi, N. Kihara, K. Kodera, T. Tobana,N. Hirayanagi, T. Fujiwara, Y.
Kawamonzen and T. Azuma, EIDEC,Japan

7A-9-2
10:45
Carbohydrate-Based
Block
Copolymer Thin Films for Optoand
Bio-Electronic
Devices(Invited)
R. Borsali, CERMAV-CNRS
Grenoble Univ., France&

Room B (Rigel, 3F)
7B-9: Nanoimprint, Nanoprint
and Rising Lithography I (10:4511:55)
A. Yokoo (NTT)T. Makela (VTT Printed and Hybrid
Functionalities)
7B-9-1
10:45
Nanoimprint Lithography As a
Directed
Self-Assembly
Tool:
Approaches and Nanometrology(Invited)
C. Simao 1, N. Kehagias 1, D.
Tuchapsky 2, W. Khunsin 1, A. Amann
2, M.A. Morris 2,3, and C.M. Sotomayor
Torres 1,4, 1 ICN2, Spain, 2 UCC, 3
TCD, Ireland and 4 ICREA, Spain

7B-9-2
11:15
Formation of Inorganic Polarizer on
The Whole 6-inch Wafer by PhotoNIL
R. Washiya and A. Miyauchi, Hitachi,
Japan

Room C (Chapel, 3F)
7C-9:
Nanoscale
Memory(10:45-11:45)
N. Banno (Leap)
T. Yanagida (Osaka Univ.)

Room D (Boardroom, 3F)
7D-9:
Transition
Metal
Dichalcogenides (10:45-12:05)
H. Ago (Kyushu Univ.)
K. Maehashi (Osaka Univ.)

7C-9-1
10:45
Al/AlOx/SiCxOy/SiC/n-Si Structured
Resistive Nonvolatile Memory
Formed by Autoxidation of Al

7D-9-1
10:45
Nonlinear Optical Properties ofMonolayer
Transition
Metal
Dichalcogenides

7C-9-2 Withdrawn
11:05
Unipolar Resistive Switching
Behaviors in Al/GeSe/Pt Structure
and Improvement of Resistive
Switching Uniformity Using Ag
Nanoparticles

7D-9-2
11:05
Solution
Processed
Self
Assembled
Molybdenum
Disulfide Wire and their Electrical
Property

K. Kida, T. Tsukamoto and Y. Suda,
Tokyo Univ. of Agriculture andTechnol., JapanJ.-H. Kim, K.-H. Nam, W.-J. Cho and H.B. Chung, Kwangwoon Univ., Korea- 10 -

S. Konabe and S. Okada, Univ. of
Tsukuba, Japan

S.-K. Lee, J. Singh, K. Rana and J.-H.
Ahn, Yonsei Univ., Korea

MNC 2014, November 4-7, 2014, Hilton Fukuoka Sea Hawk, Fukuoka, Japan
7A-9-3
11:15
DSA Process Modeling andApplication of ILT Mask Synthesis
for Cooptimizing Design Rules
and DSA Process Characteristics(Invited)

7B-9-3
11:35
Resonance-Tuned
Substrates
Produced by Nanoimprint Methodfor Highly Efficient Fluorescence
Sensing

7C-9-3
11:05
Oxygen Sensing Behaviors of
Horizontal WOx RRAM Structures

7D-9-3
11:25
Flexible Transistor and Inverter ofLarge-Area WSe2 Thin Film

7A-9 Author's Interview:
11:45-11:55

7B-9 Author's Interview:
11:55-12:05

7C-9-4
11:25
Bias Induced Cu Ion Migration
Behavior in Resistive Change
Memory Structure Observed by
Hard
X-Ray
Photoelectron
Spectroscopy

7D-9-4
11:45
Investigation
ofElectrical
Characteristics on Top-Gate
MoS2 MOSFETs with High-k
Al2O3 Dielectric

T. Nagata, Y. Yamashita, H.
Yoshikawa, M. Imura, S. Oh, K.
Kobashi and T. Chikyow, NIMS, Japan

N. Ninomiya 1,2, T. Mori 2, N. Uchida2, E. Watanabe 3, D. Tsuya 3, S.
Moriyama 3, M. Tanaka 1 and A. Ando2, 1 Yokohama Natl. Univ., 2 AIST and3 NIMS, Japan

7C-9 Author's Interview:
11:45-11:55

7D-9 Author's Interview:
12:05-12:15

Room C (Chapel, 3F)
7C-10: Sensing Devices (13:1014:30)
T. Yanagida (Osaka Univ.)
K. Nishiguchi (NTT)Room D (Boardroom, 3F)
7D-10:
Inorganic
Nanomaterials III (13:10-14:30)
K. Terabe (NIMS)
K. Kobayashi (NIMS)

7A-10-1
13:00
New Process and Material
Proposal for Next Generation
Lithography (Invited)

Room B (Rigel, 3F)
7B-10: Nanoimprint, Nanoprint
and Rising Lithography II (13:0014:30)
C.M. Sotomayor Torres (ICN2)
J. Taniguchi (Tokyo Univ. of Sci.)
7B-10-1
13:00
Nanometer to Micrometer Scale
Patterning by Thermal Roll to Roll
NIL (Invited)

7C-10-1
13:10
Long-Term Stability of Gate-AllAround Nanowire Transistors in
pH Sensing

7D-10-1
13:10
Surface Electronic Structure of
Ti1-XFexO2-δ Thin Film with
Oxygen Vacancies

7A-10-2
13:30
Radiation
Chemistryof
Fluorinated Polymers for Extreme
Ultraviolet Resist

7B-10-2
13:30
Computational Study of Mold Side
Wall Quality on De-Molding
Process in Nanoimprint Lithography

7C-10-2
13:30
Passive and Wireless SAWBased Carbon Dioxide Sensor
Using a Graphene Sensitive Film

7D-10-2
13:30
Room Temperature Synthesis of
Bi4Ge3O12
Compoundin
Aqueous Solution

7A-10-3
13:50
Effects of Thermal Fluctuations
and
Block
Copolymers
Compositions on Defects in
Directed Self-assembly Contact
Hole Shrink Process

7B-10-3
13:50
Surface Patterned Ceramic Sheetwith Micro Channels by Combined
Process of Laser Beam Machining
and Imprinting

7C-10-3
13:50
Characteristics of Self-Heated Si
Nanodevices with Selective Pt
Deposition as Hydrogen Sensors

7D-10-3
13:50
Combinatorial
Synthesisof
BaTiO3-Bi(Mg2/3Nb1/3)O3 ThinFilms
for
High-temperature
Capacitors

7A-10-4
14:10
Metal Incorporation in
Copolymer Templates

7B-10-4
14:10
Roller-type UV Imprint Lithography
to Fabricate Patterned Sapphire
Substrate

7C-10-4
14:10
SialicAcid-Sensitive
BioTransistor
Basedon
Phenylboronic
AcidFunctionalized Polymeric Layer

7D-10-4
14:10
Synthesis and Electrochemical
Properties of Co-Doped BiFeO3
Nanopowders
forHigh
Performance Supercapacitors

7A-10 Author's Interview:
14:30-14:40

7D-10 Author's Interview:
14:30-14:40

T. Dam, W. Stanton, H.-J. Stock, W.
Demmerle and D. Yim, Synopsys,USA

M. Iwanaga, B. Choi, H.T. Miyazaki, Y.
Sugimoto and K. Sakoda, NIMS, Japan

Y.-C. Lan 1, H.-C. Han 2, C.-C. Chen
3, T.-L. Chang 1 and C.-H. Huang, 1
Natl. Taiwan Normal Univ., 2 Academia
Sinica and 3 NARL, Taiwan

K. Funahashi 1, J. Pu 1, L.-J. Li 2, Y.
Iwasa 3,4 and T. Takenobu 1, 1
Waseda Univ., Japan 2 Academia
Sinica, Taiwan, 3 Univ. of Tokyo and 4
RIKEN, Japan

Lunch
Room A (Vega, 3F)
7A-10: Resist and Directed SelfAssembly (13:00-14:30)
K. Okamoto (Hokkaido Univ.)
K. Yoshimoto (Kyoto Univ.)

R. Sakamoto, S. Shigaki and Y.
Sakaida, Nissan Chemical, Japan

N. Nomura 1, K. Okamoto 1, H.
Yamamoto 2, T. Kozawa 2, R. Fujiyoshi
1 and K. Umegaki 1, 1 Hokkaido Univ.
and 2 Osaka Univ., JapanK. Fukawatase 1, K. Yoshimoto 1, Y.
Naka 2, S. Maeda 2, S. Tanaka 2, S.
Morita 2, H. Aoyama 2 and S.
Mimotogi 2, 1 Kyoto Univ. and 2
Toshiba, Japan

Block

M. Kreuzer 1, C.D. Simão 1 and C.M.
Sotomayor Torres 1,2, 1 ICN2 and 2
ICREA, Spain

7A-10 Author's Interview:
14:30-14:40

T. Makela, VTT Printed and Hybrid
Functionalities, Finland

T. Tochino, K. Shimomukai, K. Uemura,
M. Yasuda, H. Kawata and Y. Hirai,
Osaka Pref. Univ., JapanS. Hunt, F. Tsumori, Y. Xu, T. Osada and
H. Miura, Kyushu Univ., Japan

W.-C. Lin, N.-W. Chang and S.-Y. Yang,
Natl. Taiwan Univ., Taiwan

7B-10 Author's Interview:
14:30-14:40- 11 -

R.-Z. Lin, L.-C. Chiang and J.-T. Sheu,
Natl. Chiao-Tung Univ., Taiwan

C. Fu 1, S. Yang 1, S. Zhang 2, W.
Yang 2 and K. Lee 1, Ajou Univ. and 2
Dongguk Univ., Korea

C.H. Sang, J.-T. Huang and J.-T. Sheu,
Natl. Chiao Tung Univ., Taiwan

T. Arai 1, Y. Maejima 2, T. Goda 1, A.
Matsumoto 1, H. Otsuka 2 and Y.
Miyahara 1, 1 Tokyo Medical and Dental
Univ. and 2 Tokyo Univ. of Sci., Japan

K. Usui 1, S. Yamaguchi 1, E. Sakai 2,
H. Kumigashira 2 and T. Higuchi 1, 1
Tokyo Univ. of Sci. and 2 KEK, JapanK. Kobayashi 1,2, T. Ikeda 3, S.
Mihara 4, K. Hirai 4, T. Akashi 4 and Y.
Sakka 1, 1 NIMS, 2 Tokyo Univ. of
Sci., 3 AIST and 4 Hosei Univ., Japan

S. Kumaragurubaran 1, T. Nagata 1,
K. Takahashi 2, S.-G. Ri 2, Y.
Tsunekawa 2, S. Suzuki 2 and T.
Chikyow 1, 1 NIMS and 2 COMET,Japan

J. Khajonrit, S. Phumying and S.
Maensiri, Suranaree Univ. of Technol.,ThailandMNC 2014, November 4-7, 2014, Hilton Fukuoka Sea Hawk, Fukuoka, Japan
Room P （Argos D, 1F）

7P-11: 14:40-16:40 POSTER SESSION II
Symposium B ''Hybrid Nanosystem''
Chairpersons: S. Akita (Osaka Pref. Univ.) and K. Nishiguchi (NTT)
7P-11-1
7P-11-2Graphene Field Effect Transistor Pressure Gauge Consisting ofwith Persistent Photocurrent
Suspended Single-Walled Carbon
S. Ishida, Y.Anno, K. Takei, T. Arie and Nanotube
S. Akita, Osaka Pref. Univ., JapanY. Wada 1,2, Y. Fujita 1, K. Takei 1, T.
Arie 1 and S. Akita 1, 1 Osaka Pref. Univ.
and 2 Okano Works, Japan

Resist and Directed Self-Assembly
Chairpersons: S. Nagahara (Tokyo Electron) and T. Azuma (EIDEC)
7P-11-3
7P-11-4Long-Range
Orderingof Inhomogeneity
of
PAGs
in
Hexagonally Self-Assembled Dot Methacrylate-Type EUV Resist Film
Pattern of PMMA-b-PMAPOSS Studied by Molecular-Dynamics
on Controlled Brushed Layer
Simulations
N. Sasao, R. Yamamoto and A.
Kikitsu, Toshiba, Japan

M. Toriumi and T. Itani, EIDEC, Japan

7P-11-7
Design Space for “Peanut”
Shaped Guiding Patterns for DSA
193i Grapho-Epitaxy Application:
a Simulation Study

7P-11-8
Chemical Guide Pattern Fabricatedby Thermal Nanoimprinting Using
One Terminal Functionalized PS
and PS-r-PMMA Polymers

A. Fouquet, J. Belledent, S. BérardBergery, L. Perraud, A. Gharbi and
R.Tiron, CEA-LETI, France

7P-11-5
Study on Dissolution Behavior ofChemically Amplified Resists for
Extreme Ultraviolet Lithography
M. Mitsuyasu, H. Yamamoto and T.
Kozawa, Osaka Univ., Japan

7P-11-6
Development of New Polyphenol
Compound Applied to the
Negative-Tone Molecular Resistsfor EB/EUVL and Spin-on Carbon
Hardmask

K. Okada, T. Sato, T. Makinoshima
and M. Echigo, Mitsubishi Gas
Chemical., Japan

H. Wakaba, M. Okada, S. Iyoshi, Y.
Haruyama and S. Matsui, Univ. of
Hyogo, Japan

7P-11-113L
Effect of Molecular Weight on
Dissolution
Behaviorof
Poly(Methyl Methacrylate)

A. Konda 1, H. Yamamoto 1, M.
Mitsuyasu 1, T. Kozawa 1 and S.
Yoshitake 2, 1 Osaka Univ. and 2
NuFlare Technol., Japan

7P-11-114L
Fabrication of Active Surfaces
with Metastable Microgel Layers
Formed during Breath Figure
Templating
Y. Zhou, W. Sun and Z. Chen, Ningbo
Univ., China

Nanocarbons
Chairpersons: S. Okada (Univ. of Tsukuba) and S. Chiashi (Univ. of Tokyo)
7P-11-9
7P-11-10
7P-11-11
Strength Controllable Graphene High Aspect Ratio Graphene Investigation of the Benefit of
Oxide Amphiprotic Aerogels as Nanoribbon
Patterned
Using MWCNT Forests for Electrical
Highly Efficient Carrier for Anionic Hydrogen-Silsesquioxane
Semi- Contacts
and Cationic Azo Molecules
Soft Mask
H. Liu 1, A.P. Lewis 2, M.P. Down 2, L.

7P-11-12
Vertically-Aligned
CarbonNanotube
GrowthFrom
Langmuir-Blodgett Deposited Fe
or Fe3O4 Nanoparticles with
Palmitic Acid

J. Xiong 1, C. Jiao 1, S. Xu 2, J. Tao
1, D. Zhang 1, H. Lin 1 and Y. Chen 1,
1 Soochow Univ., China and 2
Shinshu Univ., Japan

J. Sun 1, T. Iwasaki 1, M. Muruganathan
1 and H. Mizuta 1,2, 1 JAIST, Japan and2 Univ. of Southampton, UK

Jiang 2 and J.W. McBride 1,2, 1 Univ.
of Southampton Malaysian Campus
and 2 Univ. of Southampton, UK

7P-11-13
X-Ray Source Using CNT Field
Emitter with Side-Gate Electrode

7P-11-14
Sol-Gel Based Metal Interconnector
Improved by Carbon Nanotubes(CNTs) in Through Silicon Via (TSV)
Structure

7P-11-15“Laminated” Ion-Gel Film as HighCapacitance Insulator for CarbonNanotube Transistor

7P-11-16
Controlling the Number of Layersof CVD Graphene Using Binary
Metal Films

7P-11-17
Enhanced Spin-Orbit Interactionin the Hydrogenated Epitaxial
Graphene on Silicon Carbide

7P-11-18
Synthesis
Graphene
Integration

7P-11-19 Withdrawn
The Study of Corrosion inGraphene-Coated Copper Singleand Polycrystals

7P-11-20
TiO2/Marimo Carbon Composite
as an Electrode Material for
Lithium Secondary Batteries

7P-11-21 Withdrawn
Formation of Heterojunction
Diodes Comprising NitrogenDoped
Ultrananocrystalline
Diamond/Amorphous Carbon and
P-TypeSiliconand
their
Photodetection

7P-11-22
Spin-State Tuning of Decamethyl
C60 by an Electric Field

7P-11-23
FacileSelf-AssemblyofFunctional Ag Nanoparticles onto
Calcium Alginate Fibers for Water
Sterilization

7P-11-24
First-Principles Study on theContact Problem of 10 nm
Graphene Channel Devices

S. Okawaki, S. Abo, F. Wakaya, M.
Abe and M. Takai, Osaka Univ., Japan

B.M. Sung 1, R.A. Lemelemu 1, D.G.
Jung 1, W.I. Jang 2 and S.H. Kong 1, 1
Kyungpook Natl. Univ. and 2 Electronics
and Telecomm. Res. Inst., Korea

K. Konishi, T. Miyamoto, K. Yon and T.
Sato, Hokkaido Univ., JapanofTransfer-freefor Direct Device

G. Kalita, T. Sugiura, S. Sharma, R.
Hirano, M.E. Ayhan, S.M. Shinde and M.
Tanemura, Nagoya Inst. of Technol.,Japan

K. Narita and S. Okada, Univ. of
Tsukuba, JapanT. Fujimoto 1, R. Shimizu 1, Y. Takagi
1, Y. Wada 1, K. Yanagi 2 and T.
Takenobu 1, 1 Waseda Univ. and 2
Tokyo Metropolitan Univ., JapanI. Wlasny 1, P. Dabrowski 2, M. Rogala
1, P. J. Kowalczyk 1, I. Pasternak 2, W.
Strupinski 2, J. M. Baranowski 2 and Z.
Klusek 1, 1 Univ. of Lodz and 2 Inst. ofElectronic Materials Technol., Poland

S.J. Xu 1, F. Zhang 2,3 and H.
Morikawa 1, 1 Shinshu Univ., Japan 2
Shazhou Inst. of Technol. and 3
Zhangjiagang Nellnano Technol.,China

A. Zkria 1,2, H. Gima 1 and T.
Yoshitake 1, 1 Kyushu Univ., Japanand 2 Aswan Univ., Egypt

7P-11-25
Growth Dynamics of Single-Layer
Graphene on Epitaxial Cu
Surfaces

Y. Ohta 1, S. Mizuno 1, M. Tsuji 1, H.
Hibino 2 and H. Ago 1,3, 1 Kyushu
Univ., 2 NTT and 3 JST-PRESTO,
Japan- 12 -

K. Nakamura, N. Kuriyama, S.
Takagiwa and M. Kushida, Chiba
Univ., Japan

Y. Takesaki 1, M. Tsuji 1 and H. Ago
1,2, 1 Kyushu Univ. and 2 JSTPRESTO, Japan

K. Miyoshi 1, K. Iwasawa 1, K. Baba
1, H. Ota 2, M. Nishitani-Gamo 2, T.
Ando 3 and M. Eguchi 1, 1 Ibaraki
Univ., 2 Toyo Univ. and 3 NIMS, Japan

H. Jippo 1,2, S. Okada 2 and M.
Ohfuchi 1, 1 Fujitsu Labs. and 2 Univ.
of Tsukuba, JapanMNC 2014, November 4-7, 2014, Hilton Fukuoka Sea Hawk, Fukuoka, Japan

Nanodevices
Chairpersons: Y. Ishikawa (Nara Inst. of Sci. and Technol.) and T. Tanaka (Saga Univ.)
7P-11-26
7P-11-27
7P-11-28
Resistive
Switching One-Selector and One-resistor Self-Rectifying
Resistive
Characteristics of Manganese Behavior of a Niobium Oxynitride Switching
Characteristicsof
Oxide
Nanoparticles
with and Niobium Nitride Bilayer for Si3N4/AlN Bilayer Device
Hexagonal Shape
Resistive Random Access Memory J.Y. Kwon, H.-D. Kim, J.H. Park, D.S.
Q. Hu, M. Park, T.-S. Lee, T.-S. Yoon, Applications
Jeon and T.G. Kim, Korea Univ., Korea

7P-11-29
Temperature Dependence of The
Threshold
Voltage
Bi-1,4Dithiolbenzen Molecular Wire

A. Boudjella 1,2, 1 Bircham InterNatl.
Univ. Madrid, Spain and Al
Khawarizmi Internatl. College, UAE

Y.J. Choi and C.J. Kang, Myongji Univ.,
Korea

M.J. Kim, H.-D. Kim, J. Park, D.Y. Kang,
K.H. Kim and T.G. Kim, Korea Univ.,
Korea

7P-11-30
Electrical and Optical Properties
of Double Layered Oxide
Quantum Dots Embedded in ZnO
Layer for Memory Device
Application

7P-11-31
The Temperature Dependence ofAg2Se Thin Film’s Resistive
Switching

7P-11-32
Porous Silicon Electrodes for High
Performance Supercapacitors

7P-11-33
Characteristics of a Flexible
Plastic-Based Lithium-Ion Battery

7P-11-34 Withdrawn
Study on Detection of Response
betweenDrosophila
LUSH
Odorant-Binding Protein andEthanol
Using
FET-Based
Biosensor

7P-11-35
Structural Properties and Sensing
Characteristics of High-k Eu2O3
Electrolyte-InsulatorSemiconductor pH Sensors

7P-11-36
Tunable Plasmonic Structures on
Multi-Photon Polymerized 3D
Micro-Springs

7P-11-37
Optimization of Extended-Gate
Field-EffectTransistorsasSensors

7P-11-38
Multiple Silicon Nanowire with
Glucose Oxidase Modification for
GlucoseConcentration
Measurement

7P-11-39
A pH Sensor Using Extended-Gate
FRTs with TiO2 Nanowires

7P-11-40
Enhancement of Dye-Sensitized
Solar
Cell
Efficiency
byFabricating Hollow Structure with
Light Scattering Effect

7P-11-41
Optimization of Hybrid Blue
Organic Light-Emitting Diodes
Based on Singlet and Triplet
Exciton Diffusion Length

7P-11-42
Improved Resistive Switching
Characteristics of NiN-Based
ReRAM with Oxygen Doping

7P-11-43
Characterization of N-Doped GeTe
Films and their Applications to HighPerformance Nano Phase-Change
Memory7P-11-44
Ge1Sb4Te7
Ultra-Multi-Level
Phase-Change Memory

7P-11-45
TCAD Based Simulations on
Trap-Induced Vt Variation of pGaN SB-MOSFETs

7P-11-46
Fabrication of Double Quantum
Dots in Multi-Wall Carbon
Nanotubes Using Ar Atom Beam
Irradiation

7P-11-47
Effect of Low-Temperature Si Buffer
Thickness on Sensitivity of Si1-xGex
Nanowire

7P-11-48
Investigation of Gate-Induced
Drain Leakage Suppression by
Fringing Field in High-k/Metal
Gate CMOS Technology

7P-11-49
Normally-Off AlGaN/GaN HEMTUsing Digital Etching Technique

7P-11-50 Withdrawn
Enhancement of Angular Color
Uniformity in White LEDs
Packagingby
Dispensing
Sedimentation

7P-11-51
Study on the Sensitivity of Surface
Enhanced Raman Spectroscopy
Using Three-Dimensional Silver
and Gold Nanostructure

7P-11-52
Enhanced Efficiency of Silicon
Solar Cells by Antireflective
Nanoparticle Arrays

7P-11-53 Withdrawn
Effects of Lead-Frame Materials
in Performance of Blue LEDs
Package by SiO2-Doped Silicone
Layer and Silicone Lens

7P-11-54
Enhancement of Light Extraction
Efficiency of OLEDs Using Si3N4Based Optical Scattering Layer

7P-11-55
Structural Properties and Electrical
Characteristics of High-k Gd2O3
and GdTiO3 α-InGaZnO Thin-Film
Transistors

7P-11-56
Extended Design Window ofResonant
Plasma-Wave
Transistor for Terahertz Emitter by
Considering Degenerate Carrier
Velocity Model with Fermi-DiracDistribution

D.U. Lee, D. Qiu, K.S. Lee, G. Oh andE.K. Kim, Hanyang Univ., Korea

I.-K. Lee, S.-W. Moon, C.-M. Im and
W.-J. Cho, Kwangwoon Univ., Korea

T.-S. Lee, H.-K. Lee, N.-J. Lee, T.-S.
Yoon, Y.-J. Choi and C.-J. Kang, Myongji
Univ., Korea

T.-M. Pan 1, C.-W. Wang 1, C.-Y. Tan 1,
W.-H. Chiu 1 and L. Chi 2, 1 Chang
Gung Univ., Taiwan and 2 Westfälische
Wilhelms-Univ. Münster, Germany

S.-P. Chang, S.-J. Chang and T.-Y. Tsai,Natl. Cheng Kung Univ., Taiwan

C.-C. Hsu, K.-H. Chu, C.-T. Meng, Y.R. Lo and C.-C. Cheng, Yuan Ze Univ.,
TaiwanD.S. Jeon, H.-D. Kim, J.H. Park, J.Y.
Kwon and T.G. Kim, Korea Univ.,Japan

H. Tomizawa 1,2, T. Yamaguchi 1, S.
Akita 3 and K. Ishibashi 1,2,4, 1
RIKEN, 2 Tokyo Univ. of Sci., 3 Osaka
Pref. Univ. and 4 RIKEN CEMS, Japan

P.-C. Wang 1, C.-L. Lin 2, Y.-K. Su 1,2,
G.-S. Huang 2, B.-R. Chen 2 and W.S. Wang 2, 1 Natl. Cheng Kung Univ.
and 2 Kun-Shan Univ., Taiwan

S.-J. Park, Y.-D. Kim and H. Lee,
Korea Univ., Korea

K. Grigoras, J. Keskinen, S. Laakso, E.
Yli-Rantala, H. Välimäki, P. Kauranen,
M. Prunnila and J. Ahopelto, VTT
Technical Res. Ctr. of Finland, Finland

H. Nishiyama, Y. Abe, T. Ichimura, Y.
Ohzeki and Y. Saito, Yamagata Univ.,
Japan

S.-W. Ryu, H.-J. Choi, C.-H. Kim, S.
Choo, S.-J. Park and H.Lee, Korea
Univ., Korea

Y. Yin, S. Iwashita and S. Hosaka,
Gunma Univ., JapanY. Yin and S. Hosaka, Gunma Univ.,
Japan

Y.-L. Lai 1, K.-M. Chang 2, C.-F. Chen 2,
C.-H. Lai 3, P.-S. Kuo 2, T.-Y. Chang 2,
Y.-M. Chen 2, A.J.-W. Whang 1, H.-L. Lai
1,3, H.-Y. Chen 4, S.-Y. Wang 5 and I.-J.
Hsieh 3, 1 Natl. Taiwan Univ. of Sci. andTechnol., 2 Natl. Chiao-Tung Univ., 3
Chung Hua Univ., 4 Huafan Univ. and 5
I-Shou Univ., Taiwan

R. Hara, R. Takahashi, T. Fukuoka, A.
Yamaguchi and Y. Utsumi, Univ. of
Hyogo, Japan

T.-M. Pan 1, C.-H. Chen 1, H.-J. Wang 1,
J.-L. Her 1 and K. Koyama 2, 1 Chang
Gung Univ., Taiwan and 2 Kagoshima
Univ., Japan- 13 -

E. Jang, J. W. Jung, S. Shin and K.R.
Kim, Ulsan Natl. Inst. of Sci. andTechnol., Korea

D. Wan 1, H.-L. Chen 2, L. Wang 1, T.C.Tseng 2, C.-Y. Fang 2, Y.-S. Lai 3
and F.-Y. Yeh 4, 1 Natl. Tsing Hua
Univ., 2 Natl. Taiwan Univ., 3 Natl.
Nano Device Lab. and 4 ITRI, Taiwan

J.Y. Park, S.-H. Kim, J.M. Seong and
K.R. Kim, Ulsan Natl. Inst. of Sci. andTechnol., Korea

K. Yang, K. Cho and S. Kim, Korea
Univ., Korea

C.-W. Chen and J.-T. Sheu, Natl.
Chiao Tung Univ., Taiwan

S.E. Lee 1, H.W. Lee 1, J.W. Lee 1, Y.
Sun 1, K.M. Hwang 1, S.N. Park 2,
S.S. Yoon 2 and Y.K. Kim 1, 1 Hongik
Univ. and 2 Sungkyunkwan Univ.,
Korea

S.-H. Doh, W.-J. Park, S.-B. Kang, C.J. Lee and S.-H. Hahm, Kyungpook
Natl. Univ., Korea

R. Yamanaka 1, T. Kanazawa 1 , E.
Yagyu 2 and Y. Miyamoto 1, 1 Tokyo
Inst. of Technol. and 2 Mitsubishi
Electric, Japan

W.-S. Wang 1, C.-L. Lin 1, B.-R. Chen
1, P.-C. Wang 2 and Y.-K. Su 1,2, 1
Kun-Shan Univ. and 2 Natl. Cheng
Kung Univ., Taiwan

7P-11-57
Structural
Parameter
Dependence of Directed Current
In
GaAs
Nanowire-BasedElectron
Brownian
RatchetDeviceY. Abe, T. Tanaka and S. Kasai,
Hokkaido Univ., JapanMNC 2014, November 4-7, 2014, Hilton Fukuoka Sea Hawk, Fukuoka, Japan
7P-11-115L
Study on Solid-Phase Crystallized
Si Nanowire Thin Film Transistors
withDifferent
Annealing
Temperatures

7P-11-117L
Comparative Study on Electricaland Structural Properties of
Mo/SiC and Ti/SiC Schottky
Contacts

7P-11-118L
Effect of Low-Temperature Si
Buffer Thickness on Sensitivity of
Si1-xGex Nanowire

Chairpersons: R. Hasunuma (Tsukuba Univ.) and S. Shingubara (Kansai Univ.)
7P-11-58
7P-11-59
7P-11-60
One-Pot Hydrothermal Synthesis, Structure, Optical and Magnetic Effect of Annealing on the
Characterization,
and Properties
ofThermally Structure and Dielectric Properties
Electrochemical Properties of Decomposed
Ni-Doped
ZnO of
SrTi(1-X)MnxO3
Ceramics
rGO/MnFe2O4 Nanocomposite
Nanorods
PreparedbyHydrothermal
I. Kotutha 1, E. Sawatsitang 2, W. K. Noipa, S. Rujirawat, R. Yimnirun, V. Method

7P-11-61
Oxide Thickness Dependence ofResistive
SwitchingCharacteristics for Ni/HfOx/Pt
ReRAM Device

W.-S. Chan, C.-H. Chou, I.-C. Lee, P.Y. Yang, C.-L. Wang, C.-Y. Liao and H.C. Cheng, National Chiao Tung Univ.,
Taiwan7P-11-116L
Large Variability of Contact
Resistance in Au/Cr/MoS2 System
and Its Suppression by Cr Thinning

K. Sano 1, T. Takahashi 1,2 and K.
Uchida 1,2, 1 Keio Univ. and 2 JSTCREST, JapanJ. Lee 1, S. Lee 1, G.C. Lee 1, T.Y.
Kang 2, S.S. Kyoung 2, S.J. Park 1, 1
Gachon Univ. and 2 Power Cube
Semi, Korea

Y.-L. Lai 1, K.-M. Chang 2, C.-F. Chen
2, C.-H. Lai 3, P.-S. Kuo 2, T.-Y. Chang
2, Y.-M. Chen 2, A.J.-W. Whang 1, H.L. Lai 1,3, H.-Y. Chen 4, S.-Y. Wang 5
and I.-J. Hsieh 3, 1 Natl. Taiwan Univ.
of Sci. and Technol., 2 Natl. ChiaoTung Univ., 3 Chung Hua Univ., 4
Huafan Univ. and 5 I-Shou Univ.,
TaiwanNanofabrication

D. Ito, S. Otsuka, Y. Hamada, T.
Shimizu and S. Shingubara, Kansai
Univ., Japan

Meewassana 1 and S. Maensiri 1, 1
Suranaree Univ. of Technol. and 2
Khon Kaen Univ., Thailand

Promarak and S. Maensiri, Suranaree
Univ. of Technol., Thailand

A. Karaphun 1, T. Putjuso 2 and E.
Swatsitang 1,3, 1 Khon Kaen Univ., 2
Rajamangala Univ. of Technol. and 3
Nanotec-KKU Ctr. of Excellence on
Advanced Nanomaterials for Energy
Production and Storage, Thailand

7P-11-62
Progressin
Determination
Method of Ultrathin Si-Based
Oxide Bandgaps From Analysis of
EnergyLoss
SignalsforPhotoelectrons

7P-11-63
Effect of Ge Substitution on The
Optical and Magnetic Properties of
CuFeO2 Delafossite Oxide

7P-11-64
Zinc Nanoparticle Production by
Reducing Zinc Oxide Using
Plasma In-Liquid Method

7P-11-65
Synthesis of FePt Nanoparticles
by Pulsed Plasma in Liquid

7P-11-66
Hyperbranched
Polymer
Functional Cotton Fabric for its in
Situ
Deposition
ofSilverNanoparticles

7P-11-67
Enhancement of Wiggling During
Amorphous Carbon Etching Due to
HBr Gas Addition

7P-11-70
Structures and their Properties of
Trimetallic Zinc(II) Complexes

7P-11-71
Synthesis, Crystal Structures,andPhotoluminescence
Properties of Silver(I) Complexesof Carbazole-Containing Ligand

A. Ohta 1, K. Makihara 1, H. Murakami
2 and S. Miyazaki 1, 1 Nagoya Univ.
and 2 Hiroshima Univ., Japan

D. Zhang, C. Jiao, J. Xiong, H. Lin and
Y. Chen, Soochow Univ., China

L. Naka-in, T. Kamwanna, P.
Srepusharawoot, S. Pinitsoontorn and V.
Amornkitbamrung, Khon Kaen Univ.,
ThailandN. Amaliyah 1,2, S. Mukasa 1, H.
Toyota 1, T. Kitamae 1 and S. Nomura
1, 1 Ehime Univ., Japan and 2
Hasanuddin Univ., Indonesia

Z. Kelgenbaeva 1, L. Chen 2, E.
Omurzak 1, H. Yoshiasa 1, H.
Okudera 3, C. Iwamoto 1, S. Hayami
1 and T. Mashimo 1, 1 Kumamoto
Univ., Japan, 2 Sichuan Univ., China
and 3 Kanazawa Univ., Japan

N. Kofuji 1, H. Ishimura 2, H. Kobayashi
2 and S. Une 2, 1 Hitachi and 2 Hitachi
High-Technol., Japan

Inorganic Nanomaterials
Chairpersons: K. Terabe (NIMS) and T. Higuchi (Tokyo Univ. of Sci.)
7P-11-68
7P-11-69
CPP Junctions Fabricated From Formation of 1D Unique Chain
Fe3Si/FeSi2 Artificial Lattices by Structures via Media EffectFIB
D. Kim, E. Kim and O.-S. Jung, Pusan

B.J. Kim, H. Lee and O.-S. Jung,
Pusan Natl. Univ., Korea

K. Sakai 1,2, Y. Asai 1, Y. Noda 1, K.
Ishibashi 1, K. Takeda 3 and T.
Yoshitake 1, 1 Kyushu Univ., 2 Kurume
Natl. College of Technol. and 3
Fukuoka Inst. of Technol., Japan

Natl. Univ., Korea

7P-11-72
Host-Guest
Nanosized
Structure

7P-11-73
Characteristics
ofTunablePhotoluminescence from DyeDoped Nanoporous Silicon

7P-11-74
Crystallization and Properties of
Copper (II) Complexes According
to Solvate Molecules

7P-11-75
Film Structures of β-AlN Thin
Films Grown on Sapphire (0001)
by Pulsed Laser Deposition

7P-11-77 Withdrawn
Effects of Carbon Doping to n-Type
β-FeSi2 on Electric Properties of nTypeβ-FeSi2/p-TypeSi
Heterojunction Diodes

7P-11-78
Carbon Nanotube Supported gC3N4 Electrocatalyst for Oxygen
Reduction Reaction in Acidic
Media

7P-11-79
Nearly Monodisperse Magnetite
Colloidal
Nanoclusters
with
Remarkable Magnetic Properties

ChemistryofSuprachannel

H. Kim, M. Park and O.-S. Jung,
Pusan Natl. Univ., Korea

7P-11-76
Preparation of Ti-Si-C Thin Films
by Magnetron Sputtering Using
Elemental
Targets
Under
Negative Substrate Bias Voltages
T. Sonoda, S. Nakao and M. Ikeyama,
AIST, Japan

J.G. Kim and O.-S. Jung, Pusan Natl.
Univ., Korea

C.-H. Hu, C.-Y. Lee, S.-L. Cheng and
V.K.S. Hsiao, Natl. Chi Nan Univ.,
TaiwanM. Takahara, S. Funasaki, T.M. Mostafa,
R. Baba, N. Promros, M. Shaban, A.
Tominaga and T. Yoshitake, Kyushu
Univ., Japan

7P-11-80
The Study of SnCl2 Doped in Dye
Sensitized Solar Cell EffectP. Suksaengrat, S. Saekoa, S.
Mitrawong, W. Jarernboon and S.
Pimanpang, Khon Kaen Univ.,
Thailand- 14 -

Y. Cho and O.-S. Jung, Pusan Natl.
Univ., Korea

H. Lim, J. Ahn, H.N. Lee and H.-J. Kim,
Korea Inst. of Industrial Technol.,Korea

T. Yoshida 1,2, Y. Ueda 1, A.
Tominaga 1, T. Okajima 3 and T.
Yoshitake 1, 1 Kyushu Univ., 2
Kurume Natl. College of Technol. and3 Saga Light Source, JapanP. Tipsawat, K. Chokprasombat and
S. Maensiri, Suranaree Univ. ofTechnol., Thailand

MNC 2014, November 4-7, 2014, Hilton Fukuoka Sea Hawk, Fukuoka, Japan
Organic Nanomaterials
Chairpersons: H. Kasai (Tohoku Univ.) and Y. Masuhara (Yamagata Univ.)
7P-11-81
7P-11-82
7P-11-83
Formation of Stacking Faults of Evaluation
the
Pore
Size Investigation of Size Controlling
Naphtacene Crystal Obtained by Distributionof
Nanoporous Factor of C60 Nanocrystals in
Physical
Vapor
Transport Organosilicate Thin Films by X- Reprecipitation Method
Technique
Ray Reflectometry Techniques
K. Shito, N. Ito and A. Masuhara,

7P-11-84
Preparation and Characterizationof TPP/chitosan Nanoparticles asa Drug Delivery System
H.-C. Yang, Kun Shan Univ., Taiwan

S. Jo 1, S. Suzuki 2 and M. Yoshimura
2, Aichi Gakuin Univ. and 2 Toyota
Technol. Inst., Japan

Y.-S. Chien, Y.-S. Yeh, Y.-S. Chen, J.
Leu and W.-E. Fu, ITRI, Taiwan

Yamagata Univ., Japan

7P-11-85
Biocompatible Nanocomposite:
Ultrahigh Broadband Absorption
andWhite-Light-Induced
Collective Heating Effects of B.
mori Silk/Gold Nanoparticles Thin
Films

7P-11-86
Dielectric
Properties
ofPolyvinylidene Fluoride Na1/3Ca1/3Bi1/3Cu3Ti4O12/Ni-nanoparticles and Multiwall
Carbon-Nanotubes

7P-11-87
Electroluminescent Properties of
Bis-Anthracenylphenylenes Endcapped with Naphthalene Groups

7P-11-88
Synergistic Effect of TiCl4-ZnO
Treated TiO2 Nanotubes in DyeSensitized Solar Cell

7P-11-89
Novel Blue Emitters Based on
Anthracene
Derivatives
withNaphthalene and Phenylquinoline
Moieties for OLEDs

7P-11-119L
Design of Amino TerminatedHyperbranched Polymer Modified
SBA-15 as Adsorbent for Dyes

7P-11-92
Welding Bi-Metal Microwires by
Joule Heating

7P-11-93
Measurement of Intracellular
Strain Energy Distributions byUsing Inverted-Electron Beam
Lithography

D. Wan 1, S.H. Tsao 1, C.-C. Yu 2, K.T. Lin 2 and H.-L. Chen 2, 1 Natl. TsingHua Univ. and 2 Natl. Taiwan Univ.,
TaiwanS.N. Park 1, S.B. Lee 1, C.W. Kim 1,
H.W. Lee 2, Y.K. Kim 2 and S.S. Yoon
1, 1 Sungkyunkwan Univ. and 2 Hongik
Univ., Korea

P. Kum-onsa and P. Thongbai, Khon
Kaen Univ., Thailand

J.J. Kim 1, S.N. Park 1, S.E. Lee 2,
H.W. Lee 2, Y.K. Kim 2 and S.S. Yoon
1, 1 Sungkyunkwan Univ. and 2 Hongik
Univ., Korea

J.-S. Lee, K.-H. Kim and H.-W. Choi,
Gachon Univ., Korea

J. Tao, J. Xiong, C. Jiao, Y. Chen and
H. Lin, Soochow Univ., China

NanoTool
Chairpersons: R. Kometani (Univ. of Tokyo) and K. Sugano (Kobe Univ.)
7P-11-90
7P-11-91
Highly-sensitive
Surface- 700°C-High-Vacuum-Annealingenhanced Raman Spectroscopy Effect on Mechanical Reliability ofwith Directionally-Arrayed Gold Ga Implanted Si Nanowires
Nanoparticle Dimers
T. Fujii 1,2, K. Kosugi 3, R. Kometani 3,

T. Sunagawa and H. Tohmyoh, Tohoku
Univ., Japan

K. Sugano 1, D. Matsui 2, T. Tsuchiya
2 and O. Tabata 2, 1 Kobe Univ. and 2
Kyoto Univ., Japan

K. Sudoh 4, M. Naito 5, S. Inoue 1 and
T. Namazu 1, 1 Univ. of Hyogo, 2
JSPS, 3 Univ. of Tokyo, 4 Osaka Univ.
and 5 Konan Univ., Japan

7P-11-94
Validity of Pt-Blue Staining on
FIB/SEM Observation of Human
Mitotic Chromosome

7P-11-95
Homogeneous
Ultra-Long
Overhang
Nanostructure
Fabrication by Feedback Control
of Blanking Time on Focused-IonBeam Chemical Vapor Deposition

7P-11-96
The
RelationshipbetweenFabrication
andResonant
Properties of NanomechanicalResonator Fabricated by FIB/EB
Dual Beam Lithography

7P-11-97
Scanning Tunneling Spectroscopy
Study of Graphene Nanoribbons
Formed on Highly Oriented
Pyrolytic Graphite

7P-11-99
MeasurementofMagnetic
Nanodot Arrays Using Scanning
Near-Field
Polarization
Microscope

7P-11-100
Triple-Walled Gold Structures with
Nano-Gaps for Non-Resonance
SurfaceEnhanced
Raman
Scattering of Rhodamine 6G
Molecules

7P-11-120L
Size-SpecificTargetCell
Purification Exploiting Depletion
Effecton
Cup-Shaped
Superparamagnetic Hemispheres

Chairpersons: R. Washiya (Hitachi) and H. Hiroshima (AIST)
7P-11-101
7P-11-102
Relationship between Aspect- Highly Efficient PEDOT:PSS/Si
Ratio and Narrowing of Reflowed Hybrid Solar Cell with Periodic
Photoresist Structures
Nanopyramids Fabricated by UVH. Mekaru, AIST, Japan
Curing Nanoimprint Lithography

7P-11-103
Evaluation of the FluorinatedAntisticking Layer by Using
Photoemission and NEXAFS
Spectroscopies

7P-11-104
Fabrication of Zirconia Micro- andNanopatterns for Roll-to-Roll UV
Imprint Lithography Stamps

7P-11-105
Thermal Imprinting for AluminumAlloy Using Ni-W Electroformed
Mold

7P-11-107
Precise Nanoimprint Processes
Optimized by Surface Energy
Model

7P-11-108
Reverse Tone UV Nanoimprint
Lithography with Fluorescent UVCurable Resin

K. Kaneyoshi 1, S. Fukuda 1, A.
Dwiranti 1, Y. Nakao 1, J. Kato 2, Y.
Otsuka 2, H. Takata 1, S. Uchiyama 1,
S. Ogawa 3 and K. Fukui 1, 1 Osaka
Univ., 2 Toray Res. Ctr. and 3 AIST,Japan

7P-11-98
A Facile Approach to Prepare PtSi Nanoball Modified Tip Apex for
Scanning
KelvinProbe
Microscopy
C.-T. Lin 1, M.-N. Chang 1,2, Y.-W.
Chen 2, S.-H. Tung 2, J. Su 1, C.-T. Wu
1, C.-N. Hsiao 1 and M.-H. Shiao 1, 1
NARL and 2 Natl. Chung Hsing Univ.,
TaiwanR. Kometani and T. Aonuma, Univ. ofTokyo, JapanT. Jin 1, R. Takahashi 1, Y. Yin 1, S.
Hosaka 1 and T. Miura 2, 1 Gunma
Univ. and 2 Unisoku, JapanT. Hoshino, H. Miyazako, A.
Wagatsuma and K. Mabuchi, Univ. ofTokyo, Japan

Y. Miyata, S. Warisawa, S. Ishihara, E.
Maeda and R. Kometani, Univ. ofTokyo, Japan

T. Baba 1, Y. Lee 1, A. Ueno 1, R.
Takigawa 2, J.-J. Delaunay 1, R.
Kometani 1 and E. Maeda 1, 1 Univ. ofTokyo and 2 Kyushu Univ., Japan

O. Kubo, Y. Sugiyama, R. Omura, M.
Shigehara, H. Tabata, N. Mori and M.
Katayama, Osaka Univ., Japan

H. Kim 1, H. Terazono 1,2, H. Takei 1,3
and K. Yasuda 1,2, 1 Kanagawa
Academy of Sci. and Technol., 2 Tokyo
Medical and Dental Univ. and 3 Toyo
Univ., Japan

Nanoimprint, Nanoprint and Rising Lithography

P.-J. Ku, J.-Y. Chen and K.W. Sun, Natl.
Chiao Tung Univ., Taiwan

M. Yasui 1, S. Kaneko 1, M. Takahashi
2, T. Sano 3, Y. Hirabayashi 1, T.
Ozawa 1 and R. Maeda 2, 1
Kanagawa Industrial Technol. Ctr., 2
AIST and 3 LEAP, Japan

7P-11-106
Lifetime Amelioration of ARS
Replica Molds by Means of HalfFilling UV-NIL

N.A.T. Yusof 1,2, T. Hayashi 1 and J.
Taniguchi 1, 1 Tokyo Univ. of Sci.,
Japan and 2 Univ. of Malaysia Pahang,
Malaysia

Y. Haruyama 1, M. Okada 1, Y. Nakai
1, T. Ishida 2 and S. Matsui 1, 1 Univ.
of Hyogo and 2 AIST, Japan

Y. Kunii and A. Kawai, Nagoya Univ. ofTechnol., Japan- 15 -

S. Choo, H.-J. Choi, S. Ryu, S.-J. Parkand H. Lee, Korea Univ., Korea

T. Uehara, S. Kubo and M. Nakagawa,Tohoku Univ., JapanMNC 2014, November 4-7, 2014, Hilton Fukuoka Sea Hawk, Fukuoka, Japan
7P-11-109
Patterning of ITO Layer of GaNBased LED by Photolithography ofNano Patterned Resist SheetO. Yamazaki, T. Katsumata, N.
Shirokura and F. Yamaguchi, Asahi
Kasei, Japan

7P-11-110
Aspect
Ratio
Enhancement
Process by Using Bi-Layer Resist

K. Shimomukai, H. Kawata, M. Yasuda
and Y. Hirai, Osaka Pref. Univ., Japan

7P-11-111
3D HSQ Structure Fabrication by
Reversal RT-Nanoimprint Using
PDMS Mold

N. Sugano, M. Okada, Y. Haruyama
and S. Matsui, Univ. of Hyogo, Japan- 16 -

7P-11-112
Surface Force Measurement of
Ultraviolet
Nanoimprint
Lithography Materials

J. Taniguchi 1, M. Hasegawa 2, H.
Amemiya 2 and H. Kobayashi 2, 1
Tokyo Univ. of Sci. and 2 ELIONIX,
Japan