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Figure 1: An electrochemical thermal flow sensor,
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Figure 2: Flow sensor fabrication process$IWHU IDEULFDWLRQ WKH VHQVRUV ZHUH DIIL[HG LQ D OXHU
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Figure 5: Normalized response of impedance electrodes toheating in 1x PBS and deionized (DI) waterFigure 4: a) Side view and b) end view of sensors packaged
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Figure 6: The rate of change of impedance upon heating
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