International Conference on
Microwave Acoustics & Mechanics
13 –15 May 2024

Program

IC-MAM 2024

Imprint
Program of the 2024 International Conference on Microwave Acoustics & Mechanics© 2024 by IEEE MTT-S

Silver Sponsor

Bronze Sponsors

Conference Organization

Exhibitors

Content
Welcome by the Conference Chairs

1

Committees and Boards

3

Sessions
M1: Opening Session . . . . . . . . . . . . . . . . . . . . . . . . .
M2: BAW Components I . . . . . . . . . . . . . . . . . . . . . . . .
M3: BAW Components II . . . . . . . . . . . . . . . . . . . . . . .
M4: MEMS Resonators . . . . . . . . . . . . . . . . . . . . . . . .
T1: SAW Components and Modelling . . . . . . . . . . . . . . . . .
T2: Interactive Forum . . . . . . . . . . . . . . . . . . . . . . . . .
T3: SAW Components I . . . . . . . . . . . . . . . . . . . . . . . .
T4: Exhibitor Session . . . . . . . . . . . . . . . . . . . . . . . . . .
W1: SAW Components II . . . . . . . . . . . . . . . . . . . . . . .
W2: Interactive Forum . . . . . . . . . . . . . . . . . . . . . . . . .
W3: SAW Components III . . . . . . . . . . . . . . . . . . . . . . .
W4: Closing Session . . . . . . . . . . . . . . . . . . . . . . . . . .

5
5
6
7
8
9
10
11
12
13
14
15
16

Student Paper Contest

17

Social Events
Welcome Reception . . . . . . . . . . . . . . . . . . . . . . . . . .
Conference Banquet . . . . . . . . . . . . . . . . . . . . . . . . . .

19
19
19

Welcome by the Conference Chairs
Dear IC-MAM’24 Delegates,
On behalf of the Institute of Electrical and Electronics Engineers (IEEE), represented through its Microwave Theory and Techniques Society (MTT-S), University of Electronic Science and Technology of China (UESTC), and our Silver
Sponsor Rohde & Schwarz, it is our great pleasure and honor to welcome you
to the Second IEEE MTT-S international Conference on Microwave Acoustics& Mechanics (IC-MAM), which is held from May 13 to 15, 2024 in Chengdu,
China. Chengdu is known as the happiest city in China, a city of history andgastronomy, and the homeland of giant and lesser pandas.
The first IC-MAM was held from July 18 to 20, 2022 in Munich, Germany. Becauseof its success, we decided to organize such a symposium regularly.
A conference cannot happen without three groups of people: At first, we wantto thank the authors, who submitted papers from 10 different countries. Furthermore, we acknowledge the work of the TPC members and steering committee,
which permitted to select 50 high-quality papers and set up an exciting conference program including seven oral sessions, two poster sessions, two plenary
sessions, and an exhibitors’ session. Finally, we thank all attendees for taking
the way to Chengdu and to joining us for this event.
Thank you to all our financial sponsors Rohde & Schwarz, Sanan IC, Scia Systems,
Advanced Modular Systems Inc./Yangxin Technology Co. Ltd., Hunan Rare
Earth Co. Ltd., and Novel Si Integration Technology as well as UESTC for the
conference organization. Without their generous support, a conference like thiscannot happen.
We strongly believe that IC-MAM2024 represents a unique and unprecedented
opportunity to bring together researchers and practitioners such as materials
scientists, physicists, microwave engineers and process technologists of different
background, to share the most recent advances in new materials and manufacturing processes as well as components and devices, which represent the key forthe development of future RF, microwave and mm-wave devices, circuits, andsystems based on Microwave Acoustics and RF-MEMS.
Besides the technical program, we invite you to enjoy our networking activities
with the Welcome Dinner on Monday and our Banquet on Tuesday.
We wish you a successful and interesting conference!
Ken-Ya Hashimoto
Conference Chair

Shuji Tanaka
TPC Chair

Amelie Hagelauer
TPC Co-Chair

1

Committees and Boards
Conference Committee
Conference General Chair
Ken-ya Hashimoto
University of Electronic Science and Technology of China, China
Technical Program Chair
Shuji Tanaka
Tohoku University, Japan
Amelie Hagelauer
Technical University of Munich, Germany
Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT,
Germany
Conference Finance Chair
Jingfu Bao
University of Electronic Science and Technology of China, China
Holger Maune
Otto-von-Guericke-Universität Magdeburg, Germany
Publications Chair
Qiaozhen Zhang
Shanghai Normal University, China
Exhibition Chair
Gongbin Tang
Shandong University, China
Local Arrangement Chairs
Cheng Tu
University of Electronic Science and Technology of China, China
Li Ting
University of Electronic Science and Technology of China, China
Operational Office
Leonie Sallinger
Fraunhofer Institute for Electronic Microsystems and Solid State Technologies EMFT,
Germany

3

Review Board
Robert Aigner • Omar Elmazria • Rei Goto • Amelie Hagelauer• Tao Han • Ken-Ya
Hashimoto• Yulin Huang • Shogo Inoue • Bao Jingfu • Tetsuya Kimura • Jun Kondoh• Masayoshi Koshino • Ming-Huang Li• Xinyi Li • Ruochen Lu • Holger Maune•Andreas Mayer• Hiroyuki Nakamura • Gianluca Piazza • Hagen Schmidt • Marc Solal •Chengliang Sun • Andreas Tag • Shuji Tanaka • Gongbin Tang • Cheng Tu • Masanori
Ueda • Karl Wagner • Ji Wang • Yiliu Wang • Nan Wu • Ventsislav Yantchev • Shuai Yao• Benfeng Zhang • Qiaozhen Zhang • Sergei Zhgoon • Yao Zhu

4SessionsMonday 13th May
09:00–10:00

Session M1: Opening Session
Welcome Address
Ken-Ya Hashimoto, Conference Chair
Keynote Talk
Microwave Acoustic Wave Devices –A Journey Through the Past to the Future
Amelie Hagelauer
Professor at TUM & Director of Fraunhofer EMFT
Technical University of Munich, Munich, Germany
Fraunhofer Institute for Electronic Microsystems and Solid State
Technologies EMFT, Munich, Germany
This presentation offers a comprehensive overview of the advancements in
microwave acoustic wave (SAW and BAW) devices over the past 15 years. Itemphasizes the evolution of microwave acoustic wave technology, highlighting significant milestones and breakthroughs. The presentation addresses thechallenges and presents solutions for minimizing losses, particularly in BAW
devices. It also explores novel materials like AlScN, known for the improved
performance characteristics as well as higher frequencies. Additionally, effects
of non-linearities in SAW devices and their modeling will be presented. Lastly,
the talk offers an insight into the future of microwave acoustic devices.

5

Monday 13th May
10:25–12:00

Session M2: BAW Components I
Chair:

Amelie Hagelauer, Fraunhofer EMFT, Germany

10:25 ✰

M2-1
Polarization Inverted ScAlN Multilayer BAW Resonators(invited)
Takahiko Yanagitani
Waseda University, Japan

10:50

M2-2
Laterally Excited Bulk Acoustic Resonators With Convex
Interdigital Electrodes Towards SHF Applications
Zhiwei Wen, Wenjuan Liu, Min Zeng, Xin Tong, Yuanhang Qu, Yan
Liu, Yao Cai, Chengliang Sun
Wuhan University, China

11:05 ✦

M2-3
Double Mode Type BAW(DMB) Filter Based on ScAlN
Multilayers SMR Using Polarization-Inversion or IntermediateElectrodes (Student Paper Finalist)
Momoka Matsumura, Saneyuki Shibata, Takahiko Yanagitani
Waseda University, Japan

11:20 ✦

M2-4
Ferroelectric Hysteresis Properties of Non-Doped AlN SMR(Student Paper Finalist)
Ayaka Hanai1,2 , Takahiko Yanagitani1 , Junjun Jia1 , Satoshi
Matsumura1
1 Waseda University, Japan
2 ZAIKEN, Japan

11:35 ✰

M2-5
Demonstration of 8-Inch Thin-Film Sc0.3Al0.7N BAW Resonator With High Electromechanical Coupling Coefficient (invited)
You Qian, Xinghua Wang, Ying Zhang, Chen Liu, Yao Zhu
Institute of Microelectronics, A*STAR, Singapore

6Session M3: BAW Components II
Holger Maune, Otto von Guericke University Magdeburg, Germany

14:00 ✰

M3-1
On the Design of High Overtone BAW Resonators With
Enhanced Power Handling (invited)
Ventsislav Yantchev1,2 , Yuancheng Ji2
1 Q-Arts Consulting Ltd., Bulgaria
2 Huawei Technologies Oy, Finland

14:25

M3-2
Neural Network Assisted 3D FBAR Modeling With Random Electrode Shapes
Xi He1 , Xing Haw Marvin Tan2 , Chen Ma1 , Feixuan Huang1 , Fengyuan
Yang1 , Qinghua Ren1 , Yiming Ma1 , Jianlin Chen1 , Nan Wang1
1 Shanghai University, China
2 Agency for Science Technology and Research, Singapore

14:40

M3-3
Wide-Band and High-Rejection RF Filters for 5G Applications Using BAW-On-Insulator Technology
Ji Liang, Xiaoru Wang, Jie Zou, Duan Feng
Shenzhen Newsonic Technologies Co. Ltd, China

14:55

M3-4
SMR With Epitaxial Top and Bottom Metal Acoustic Bragg
Reflectors as Thick Electrodes
MIsaki Tomioka, Satoshi Tokai, Takahiko Yanagitani
Waseda University, Japan

15:10 ✰

M3-5
Nonlinear Distortion and Its Analysis on Radio Frequency
Thin Film Bulk Acoustic Devices (invited)
Masanori Ueda1 , Go Endo1 , Satoshi Orito1 , Shinji Taniguchi1 , Ken-ya
Hashimoto2
1 TAIYO YUDEN Mobile Technology Co., Ltd., Japan
2 Chiba University, Japan

7

Monday 13th May
13:30–15:05

Chair:

Monday 13th May
15:30–17:00

Session M4: MEMS Resonators
Chair:

Shuji Tanaka, Tohoku University, Japan

16:00

M4-1
Phononic Crystal for Enhancement of MEMS Resonator
Quality Factor
Mohammed Awad Ahmed Mohammed1 , Temesgen Bailie Workie1,2 ,Bao Jingfu1 , Ken-Ya Hashimoto1
1 University of Electronic Science and Technology of China, China
2 Tiantong Ruihong Technology Co Ltd, China

16:15 ✦

M4-2
Multi-Stage Frames for Q-Enhancement in Piezoelectric
MEMS Resonators (Student Paper Finalist)
Shuxian Wu1 , Zonglin Wu1 , Feihong Bao2 , Qiaozhen Zhang3 , Yicen
Liu4 , Songhai Fan4 , Bao Jingfu2 , XianQI Lin2 , Jie Zou1
1 Fudan University, China
2 University of Electronic Science and Technology of China, China
3 Shanghai Normal University, China
4 State Grid Sichuan Electric Power Company, China

16:30 ✦M4-3
A Lamb Wave Resonator With Trapezoidal InterdigitatedElectrodes (Student Paper Finalist)
Xiang Chen1 , Yuanhang Qu1 , Tiancheng Luo2 , Xiyu Gu1 , Xiaoming
Huang1 , Yao Cai1 , Shishang Guo1 , Yan Liu1 , Chengliang Sun1
1 Wuhan University, China
2 Agency for Science, Technology and Research (a*star), Singapore

16:45

M4-4
Analysis of Plate Acoustic Waves Resonance Properties
Using Thin Plate of LiNbO3/SiC
Noriyuki Watanabe, Shoji Kakio
University of Yamanashi, Japan

17:00 ✦

M4-5
Development of Directly Bonded LiNbO3 Plates and Microfabricated Quartz Crystal Structures (Student Paper Finalist)
Ko-hei Sano1,2 , Sho Nagai2 , Yoshitaka Ono2 , Yasuo Hayashi2 , Takahiko
Yanagitani1
1 Waseda University
2 AGC Inc., Japan

17:15

M4-6
Horizontal Harmonics Mitigation in Thickness Shear A1
Mode Resonators
Temesgen Bailie Workie1,2 , Xiuwen Bi2 , Junyao Shen1,2 , Simon Lam2 ,Bao Jingfu1 , Ken-Ya Hashimoto1
1 University of Electronic Science and Technology of China & Tiantong Ruihong
Technology Co Ltd, China
2 Tiantong Ruihong Technology Co Ltd, China

8

Session T1: SAW Components and Modelling
Masanori Ueda, TAIYO YUDEN Mobile Technology Co. Ltd., Japan

09:00 ✰

T1-1
High-Performance Wideband SAW Filters on LNOI Platform (invited)
Weibiao Wang1 , Sulei Fu2 , Zhibin Xu1 , Huiping Xu2 , Peisen Liu2 ,Boyuan Xiao2 , Feng Pan2
1 SHOULDER Electronics Limited, China
2 Tsinghua University, China

09:25

T1-2
A Precise COM Model Parameter Extraction Method With
Automated Curve-Fitting and Accuracy Verification
Kuanmao Xu1 , Jinghong Wang1 , Ji Xuan1 , Bao Jingfu2 , Xiaohui Li1
1 Suzhou Shengxin Electronic Tech Ltd, China
2 University of Electronic Science and Technology of China, China

09:40

T1-3
The Design of SAW Filters With CNN Modeling andCuckoo Search (CS) Optimization
Xuanying Hou
The Institute of Electromagnetics and Acoustics, China

09:55 ✦

T1-4
Near 6-GHz Longitudinal Leaky SAW Filters With Spurious
Mitigation on LiNbO3/SiO2/SiC Platform (Student Paper Finalist)
Peisen Liu1 , Sulei Fu1 , Huiping Xu1 , Boyuan Xiao1 , Xinchen Zhou1 ,Qiufeng Xu1 , Qiaozhen Zhang2 , Rui Wang1 , Cheng Song1 , Fei Zeng1 ,Weibiao Wang3 , Feng Pan1
1 Tsinghua University, China
2 Shanghai Normal University, China
3 SHOULDER Electronics Limited, China

10:10 ✰

T1-5
Wideband Longitudinal Leaky SAW Filter Implementation
for Wi-Fi 7 (invited)
Mijing Sun, Xinjian Ke, Shibin Zhang, Pengcheng Zheng, Xiaoli Fang,
Juxing He, Xin Ou
Shanghai Institute of Microsystem and Information Technology, China, Chinese
Academy of Sciences, China

9

Tuesday 14th May
09:00–10:35

Chair:

Tuesday 14th May
10:35–12:00

Session T2: Interactive Forum
Chair:

Ken-Ya Hashimoto, University of Electronic Science and Technology of China

T2-1

Theoretical Investigation of a Resonant Magnetoelectric Sensor
Based on a Piezoelectric-On-Silicon Length-Extensional Mode Resonator
Yongjun Du, Fuzhe Fan, Jiacheng Qiao, Jingen Wu, Zhongqiang Hu,
Ming Liu
Xi’an Jiaotong University, China
An Acoustic Resonator With 18% Effective Electromechanical Coupling Exhibiting Low TCF and Improved Thermal Conductivity at 8
GHz
Feixuan Huang, Chen Ma, Jiewei Jiang, Xi He, Fengyuan Yang, Jianlin
Chen, Qinghua Ren, Yiming Ma, Nan Wang
Shanghai University, China
Towards Artificial Intelligence Acoustic Wave Filter Design
Guillem Reixach1 , Eloi Guerrero2 , Lluis Acosta1 , Pedro de Paco1
1 Universitat Autònoma de Barcelona, Spain
2 Qorvo, Spain
A Differential Surface Acoustic Wave Magnetic Field Sensor With
Temperature Compensation
Yang Yang, Qiaozhen Zhang
Shanghai Normal University, China
Coupling-Of-Modes Parameters Extraction by Using an Inverse Artificial Neural Network Design
Yang Yang1 , Aleh Loseu2 , Caizhi Zheng3 , Wenhai Ni1 , Wenhua Xu1 ,Ronghan Hong4 , Qing Huo Liu4
1 CanaanTek Co., Ltd, China
2 SOLLO LLC, USA
3 Xiamen University, China
4 Eastern Institute for Advanced Study, China
Simulation of Surface Acoustic Wave Torque Sensors Using Coupling of Mode Analysis
Chao Jiang, Xiaoli Cao, Lianggui Tang
Chongqing Technology and Business University, China
Study on 36YX-LiTaO3/36Y90X-Quartz Structure for SH-SAWsensor
Application
Yudai Ota, Jun Kondoh
Shizuoka University, Japan

T2-2

T2-3

T2-4

T2-5

T2-6

T2-7

10

Session T3: SAW Components I
Yiliu Wang, Skyworks Solutions Inc., USA

13:30 ✰

T3-1
Multiplexer Design to Minimize Gamma Loading to Higher
Frequency Filters (invited)
Yiliu Wang, Tomoya Komatsu, Nan Wu
Skyworks Solutions, Inc., USA

13:55 ✦

T3-2
Synthesis of Wideband Filters Based on Acoustic Wave
Transversal and Ladder Topologies (Student Paper Finalist)
Santi Cano, Lluis Acosta, Carlos Caballero, Jordi Verdu, Pedro Antonio
de Paco Sanchez
Universitat Autònoma de Barcelona (UAB), Spain

14:10

T3-3
Observation of Nonlinearity Induced by Transverse Modesin SAW Devices Based on 36ºYX-LiTaO3/SiO2/SiC Structure
Baichuan Li1 , Guangyao Lv2 , Qiaozhen Zhang2 , Zonglin Wu3 , Feihong
Bao3 , Sulei Fu4 , Weibiao Wang5 , Hui Zhang1
1 Southeast University, China
2 Shanghai Normal University, China
3 University of Electronic Science and Technology of China, China
4 University of Electronic Science and Technology of China, China
5 SHOULDER Electronics Limited, China

14:25

T3-4
Enhanced Electromechanical Coupling Near the Phase
Boundary in Wurtzite (Mg, Zn)O and (Sc, Al)N
Junjun Jia, Takahiko Yanagitani

14:40 ✰T3-5
SAW Filters Based on Composite Structure (invited)
Xiaobing Chen

Waseda University, Japan

Huayuan Micro Electronic Technology Co., LTD, China

11

Tuesday 14th May
13:30–15:05

Chair:

Tuesday 14th May
15:30–17:00

Session T4: Exhibitor Session
In this session, our sponsors and exhibitors showcase their latest developments.
Hunan Rare Earth Co. Ltd.
Shanghai Novel Si Integration Technology Co. Ltd .
Advanced Modular Systems Inc./Yangxin Technology Co. Ltd.
Sanan IC
scia Systems GmbH
Rohde & Schwarz

12Session W1: SAW Components II
Rei Goto, Skyworks, Germany

09:00 ✰

W1-1
Imaging GHz Surface Acoustic Waves on a Phononic Crystal Island (invited)
Oliver B. Wright1,2 , Motonobu Tomoda2 , Paul H. Otsuka2 , Osamu
Matsuda2
1 Osaka University, Japan
2 Hokkaido University, Japan

09:25

W1-2
Thin-Film Lithium Niobate on Insulator Surface Acoustic
Wave Devices for 6G Centimeter Bands
Tzu-Hsuan Hsu1 , Joshua Campbell1 , Jack P Kramer1 , Sinwoo Cho1 ,Zhi-Qiang Lee2 , Ming-Huang Li2 , Ruochen Lu1
1 The University of Texas at Austin, USA
2 National Tsing Hua University, Taiwan

09:40 ✦

W1-3
Study on Loss Mechanisms in I.H.P. SAW Assisted by Full3D Hierarchical Cascading Technique (Student Paper Finalist)
Yiming Liu, Yiwen He, Zijiang Yang, Fangyi Li, Bao Jingfu, Ken-Ya
Hashimoto
University of Electronic Science and Technology of China, China

10:55

W1-4
POI Wafers for Sub-GHz Bandpass SAW Filters
Sylvain J Ballandras1 , Xavier Seah2 , Emilie Courjon1 , Thierry Hilt1 ,Cedrick Chappaz1 , Florent Bernard1 , Saly NDiaye1 , Alexandre
Clairet1 , Tony Makdissy1 , Thierry Laroche1 , Eric Michoulier1 , Aziz
Alami-Idrissi1 , Philipp Achatz1 , Christophe Didier1
1 SOITEC SA, France
2 SOITEC SA, Singapore

10:10 ✰

W1-5
Frequency Hysteresis Compensation of a Miniature OCXO
Using Resonator Temperature Output for Extending Holdover Performance (invited)
Wan-Lin Hsieh, Tun-Jen Hsiao
TXC Corporation, Taiwan

13

Wednesday 15th May
09:00–10:35

Chair:

Wednesday 15th May
10:35–12:00

Session W2: Interactive Forum
Chair:

Ken-Ya Hashimoto, University of Electronic Science and Technology of China

W2-1

Automated Electro-Thermal Model of Surface Acoustic Wave Filters
ZongYang Liu, Ming Li, Kai Huang, Xin Xia, kunpeng Li Li, Gongbin
Tang
Shandong University, China
The Impact of Selectively Filling With SiO2 on Transverse Modes in
TC-SAW Resonators
Menghui Li, Mengke Qi, Yuanhang Chen, Yimin Cheng, Liang Cao,
Xiaojing Mu
Chongqing University, China
High-Q SAW Resonators Based on High-Crystallinity AlScN-AlNSapphire Substrate
Fuhong Lin1 , Kai Yang1 , Haoran Tao1 , Qikun Wang2 , Liang Wu2 ,Chengjie Zuo1
1 University of Science and Technology of China, China
2 Ultratrend Technologies Inc., China
Spurious-Free SAW Filters With Inherent Suppression of Transverse
Modes on LiTaO3/SiO2/Quartz Platform
Boyuan Xiao1 , Sulei Fu1 , Huiping Xu1 , Peisen Liu1 , Xinchen Zhou1 ,Qiufeng Xu1 , Qiaozhen Zhang2 , Rui Wang1 , Cheng Song1 , Fei Zeng1 ,Weibiao Wang3 , Feng Pan1
1 Tsinghua University, China
2 Shanghai Normal University, China
3 SHOULDER Electronics Limited, China
Analysis of Surface Acoustic Wave Propagation Characteristics on
Lead-Free KNN Single Crystal
Lin Li, Qiaozhen Zhang, Xiangyong Zhao
Shanghai Normal University, China
Design of Trapezoidal-DMS Structured Filters by Direct Bandpass
Synthesis Methods
kunpeng Li Li, Gongbin Tang, Ming Li, Kai Huang, ZongYang Liu,
Xin Xia
ShanDong University, China

W2-2

W2-3

W2-4

W2-5

W2-6

14

Session W3: SAW Components III
Shoji Kakio, University of Yamanashi, Japan

13:30

W3-1
Influence of the Tilted IDT on Nonlinear Harmonic Signals
in SAW Resonators on LiNbO3/SiO2/Si Structure
Guangyao Lv1 , Baichuan Li2 , Qiaozhen Zhang1 , Shuxian Wu3 , Feihong Bao4 , Sulei Fu5 , Weibiao Wang6
1 Shanghai Normal University, China
2 Southeast University, China
3 Fudan University, China
4 University of Electronic Science and Technology of China, China
5 Tsinghua University, China

13:45

W3-2
Transverse Mode Suppression for Low Velocity SAW Resonator on Al/Pt/Low-Cut LT/Quartz Structure
Richeng Hu, Xinzhi Li, Yiwen He, Zijiang Yang, Bao Jingfu, Ken-Ya
Hashimoto
University of Electronic Science and Technology of China, China

14:00 ✦

W3-3
Use of Dielectric Stripes for Transverse Mode Suppression
for Surface Acoustic Wave Resonators (Student Paper Finalist)
Fangyi Li, Yiwen He, Yang Ying, Yiming Liu, Bao Jingfu, Ken-Ya
Hashimoto
University of Electronic Science and Technology of China, China

14:15

W3-4
Transverse Mode Suppression for S0-Like SAW Mode Resonator
Xinzhi Li, Richeng Hu, Yiwen He, Bao Jingfu, Ken-Ya Hashimoto
University of Electronic Science and Technology of China, China

15

Wednesday 15th May
13:30–14:30

Chair:

Wednesday 15th May
14:30–15:30

Session W4: Closing Session
Keynote Talk
Evolution of SAW and BAW Devices Using Thin LiTaO3 and LiNbO3
Shuji Tanaka
Professor
Tohoku University, Japan

This paper reviews three types of HAL (Hetero Acoustic Layer) devices using
thin LiTaO3 (LT) and LiNbO3 (LN). The production technology of thin LN
and LT on a support wafer is a game-changing technology for acoustic wave
devices, which has been made common by Murata Manufacturing’s innovative
work, “I.H.P. SAW.” We have started the development of HAL devices in 2013.
LT/quartz HAL SAW devices demonstrated promising performances including
high impedance ratio, near-zero TCF (temperature coefficient of frequency) andspurious-free high frequency characteristic. LN/quartz HAL SAW devices withan extremely high impedance ratio and ultrawide band were also demonstrated.
Thin LT and LN are also useful for BAW devices. In this paper, we introduce anovertone SMR (solidly mounted resonator) using LN on a unique Bragg reflector.
The main response is at 9.5 GHz although 1 µm thick LN is used. Finally, newtypes of BAW devices inspired by “XBAR” is briefly discussed.
Awards Ceremony
Closing Remarks
Ken-Ya Hashimoto, Conference Chair

16

Student Paper Contest
A Student Paper Contest will be held during IC-MAM 2024. The contest is open
to all students younger than 30 years old on the opening day of the conference;
they have to appear as first author and present the paper at the conference.
The following finalist have been selected by the TPC and the Awards Committee.
They will present their paper in the respective session and on Tuesday, May 14
during the regular poster session. The poster itself will be on display during thewhole week.
M2-3

Double Mode Type BAW(DMB) Filter Based on ScAlN Multilayers
SMR Using Polarization-Inversion or Intermediate-Electrodes
Momoka Matsumura, Saneyuki Shibata, Takahiko Yanagitani
Waseda University, Japan

M2-4

Ferroelectric Hysteresis Properties of Non-Doped AlN SMR
Ayaka Hanai1,2 , Takahiko Yanagitani1 , Junjun Jia1 , Satoshi
Matsumura1
1 Waseda University, Japan
2 ZAIKEN, Japan

M4-2

Multi-Stage Frames for Q-Enhancement in Piezoelectric MEMS Resonators
Shuxian Wu1 , Zonglin Wu1 , Feihong Bao2 , Qiaozhen Zhang3 , Yicen
Liu4 , Songhai Fan4 , Bao Jingfu2 , XianQI Lin2 , Jie Zou1
1 Fudan University, China
2 University of Electronic Science and Technology of China, China
3 Shanghai Normal University, China
4 State Grid Sichuan Electric Power Company, China

M4-3

A Lamb Wave Resonator With Trapezoidal Interdigitated Electrodes
Xiang Chen1 , Yuanhang Qu1 , Tiancheng Luo2 , Xiyu Gu1 , Xiaoming
Huang1 , Yao Cai1 , Shishang Guo1 , Yan Liu1 , Chengliang Sun1
1 Wuhan University, China
2 Agency for Science, Technology and Research (a*star), Singapore

M4-5

Development of Directly Bonded LiNbO3 Plates and Microfabricated Quartz Crystal Structures
Ko-hei Sano1,2 , Sho Nagai2 , Yoshitaka Ono2 , Yasuo Hayashi2 , Takahiko
Yanagitani1
1 Waseda University
2 AGC Inc., Japan

17

T1-4

Near 6-GHz Longitudinal Leaky SAW Filters With Spurious Mitigation on LiNbO3/SiO2/SiC Platform
Peisen Liu1 , Sulei Fu1 , Huiping Xu1 , Boyuan Xiao1 , Xinchen Zhou1 ,Qiufeng Xu1 , Qiaozhen Zhang2 , Rui Wang1 , Cheng Song1 , Fei Zeng1 ,Weibiao Wang3 , Feng Pan1
1 Tsinghua University, China
2 Shanghai Normal University, China
3 SHOULDER Electronics Limited, China

T2-7

Study on 36YX-LiTaO3/36Y90X-Quartz Structure for SH-SAWsensor
Application
Yudai Ota, Jun Kondoh
Shizuoka University, Japan

T3-2

Synthesis of Wideband Filters Based on Acoustic Wave Transversaland Ladder Topologies
Santi Cano, Lluis Acosta, Carlos Caballero, Jordi Verdu, Pedro Antonio
de Paco Sanchez
Universitat Autònoma de Barcelona (UAB), Spain

W1-3

Study on Loss Mechanisms in I.H.P. SAW Assisted by Full-3D Hierarchical Cascading Technique
Yiming Liu, Yiwen He, Zijiang Yang, Fangyi Li, Bao Jingfu, Ken-Ya
Hashimoto
University of Electronic Science and Technology of China, China

W3-3

Use of Dielectric Stripes for Transverse Mode Suppression for Surface Acoustic Wave Resonators
Fangyi Li, Yiwen He, Yang Ying, Yiming Liu, Bao Jingfu, Ken-Ya
Hashimoto
University of Electronic Science and Technology of China, China

18

Social Events
Welcome Reception
The Welcome Dinner will take place on Monday, 13th May 2024, starting from18:00 in the Diamond Ballroom, 2nd floor in Crowne Plaza Chengdu West.

Conference Banquet
All IC-MAM attendees are invited to join us for the conference dinner on Tuesday
evening, 14th May 2024. The dinner is taking place in the Diamond Ballroom,
2nd floor in Crowne Plaza Chengdu West, starting from 18:00.

19

Notes20

Notes21

09:00

18:00

18:00

18:40
19:00
19:20
19:40
•••

18:40

19:00

19:20

19:40

•••

18:20

17:40

17:40

Welcome Dinner
18:00—21:00

17:20

17:20

18:20

17:00

17:00

16:20

16:00

16:40

Session M4
MEMS Resonators
15:30—17:00

15:40

15:20

16:40

16:20

16:00

15:40

Coffee Break

15:00

15:00

15:20

14:40

14:20

14:40

14:20

14:00

13:40

13:40

Session M3
BAW Components II
13:30—15:05

13:20

13:20

14:00

13:00

12:40

13:00

Lunch BreakConference Banquet
18:00—21:00

Session T4
Exhibitor Session
15:30—17:00

Coffee BreakSession T3
SAW components I
13:30—15:05

Lunch Break

09:00

•••

19:40

19:20

19:00

18:40

18:20

18:00

17:40

17:20

•••

19:40

19:20

19:00

18:40

18:20

18:00

17:40

17:20

17:00

16:40
17:00

16:20

16:00

15:40

15:20

15:00

14:40

14:20

16:40

Session W4
Closing Session
14:30—15:30

14:00

16:20

16:00

15:40

15:20

15:00

14:40

14:20

14:00

13:40

13:00

12:40

12:20

12:00

11:40

11:20

11:00

10:40

10:20

13:40

Coffee Break

10:00

09:40

Registration opens
at 08:00
09:20

13:20
Session W3
SAW components III
13:30—14:30

Lunch BreakSession W2
Interactive Forum
10:35—12:00

Session W1
SAW Components II
09:00—10:35

Wednesday 15.05.2024

13:20

13:00

12:40

12:20

12:20

12:20

12:40

12:00

12:00

11:20

11:00

10:40

12:00

Coffee Break

10:20

10:00

09:40

11:40

Session T2
Interactive Forum
10:35—12:00

09:00

Registration opens
at 08:00
09:20

11:40

11:20

11:00

Session T1
SAW Components andModelling
09:00—10:35

Tuesday 14.05.2024

11:40

11:20

11:00

10:40

10:40

10:00

09:40

10:20

Session M2
BAW Components I
10:25—12:00

09:00

Registration opens
at 08:00
09:20

Coffee BreakSession M1
Opening Session
09:00—10:00

10:20

10:00

09:40

09:20

Monday 13.05.2024