No.SP188-④

高精度定量吐出泵系列High-Precision Constant Dispensing Pump Series
注：ｂタイプの使用サイズは左右 50mm〜120mm未満
このデータからの縮率は 50%〜120%未満

电动波纹管泵

Electric Bellows Pump

电动CT泵Electric CT Pump

电动RT泵

Electric RT Pump

电动HT泵Electric HT Pump

高精度定量吐出泵系列High-Precision Constant Dispensing Pump Series■小金井制泵系列的特点

・接液部由氟树脂构成，适用于各种药液。

・接液部采用无滑动部结构，几乎不产生粒子。

・无需日常维护，实现保持高重复精度的定量吐出。

Features of Koganei Pump Series

・The liquid contact area is composed of fluorine resin, and is resistant to various liquid
chemicals.
・T he liquid contact area is structured without a slide portion, to virtually avoid
generation of particles.
・Daily maintenance is unnecessary, enabling constant dispensing maintained at highrepeatability of dispensing volume.

■用途例

Application Examples
要求高重复精度和直线性的用途 ⇒ 定量性能重视型
Applications demanding advanced repeatability of dispensing volume and linearity ⇒ Constant dispensing performance enhanced type

例：
在晶片上涂覆
Example: Coating a wafer

例：药液的填充、称量、混合Example: F illing, weighing
and mixing liquid
chemicals

要求从涂覆开始到结束的膜厚均匀性的用途 ⇒ 定流量性能重视型
Applications demanding film uniformity from coating beginning to end ⇒ Constant flow rate performance enhanced type

例：
狭缝涂布
Example: Slit coating●❶

例：在磁盘上涂覆
Example: Coating a disk

■泵产品系列

以半导体制造工序为起点，小金井制造的泵被广泛应用于FPD、电池、试剂等领域。
用户可根据用途和所使用的工件，从驱动方式和泵类型等之中选择适合的泵。

Pump Product Range
Koganei pumps are widely used in semiconductor manufacturing processes, as well as for flat
panel displays (FPDs), batteries, and reagents, etc.
Select pumps from operating type or pump type that suit the applications or workpieces used bycustomers.
泵类型
Pump type

驱动方式
Operating type空气压驱动(气缸驱动)
Pneumatic(Air cylinder)
定量
性能重视
型
Constant
dispensing
performanceenhanced type

定量性能
+
定流量
性能重视
型
Constant
dispensing
performanceandconstant
flow rate
performanceenhanced type步进电机驱动Stepping motorAC伺服电机驱动AC servo motor步进电机驱动Stepping motor

系列名(基本型号)
Series name (Basic model)
波纹管泵Bellows Pump
(F-APB)刊载页码
最大吐出量 ㎖
Maximum dispensing volume ㎖ Page
8、15、40、60、80

❸

10、50

❼〜❽

波纹管泵
Bellows Pump
(F-EPB)

8、15、40、80❹CT泵CT Pump(F-EPT)

6、10、20、60

❺〜❻

PT泵
PT Pump(F-EPP)

1、5、10、20、50、100、200

❼〜❽

CT泵
CT Pump(F-EPT)

30、60、100、200、300

❾〜

PT泵
PT Pump(F-EPP)

100、200、300

❾〜

HT泵
HT Pump(F-EPH)

100、200、300、500

❾〜

RT泵
RT Pump(F-EPR)

5、20



PT泵
PT Pump(F-APP)❷气动波纹管泵Pneumatic Bellows Pump
F-APB Series●接液部为特氟龙可适用于各种药液。
●波纹管方式无滑动部，几乎不产生粒子。
●使用调整螺母轻松设定吐出量气缸驱动，实现低成本。

●Liquid contact area is Teflon
Capable of handling various liquid chemicals.
●Bellows method
There is no sliding portion; so generation of particles is almost non-existent.
●Simple dispensing volume setting through using adjustment nut
Achieves low cost through operating an air cylinder.

■规格 Specifications型号 Models项目 Items

使用流体 MediaF-APB08-6W

最大吐出量 Maximum dispensing volume

最大吐出压力 Maximum dispensing pressure

8 mℓ

F-APB15-8W

质量 Mass

F-APB60-1W

40 mℓ

60 mℓ

2.8 kg

3.2 kg

光刻胶、纯水、药液 Photoresist solution, pure water, chemical solution
15 mℓ

0.05 MPa   

吐出量重复精度 Repeatability of dispensing volume
耐压 Proof Pressure

F-APB40-7W±1％ F.S.
0.15 MPa
1.3 kg

1.4 kg※其他型号和规格的详情请向就近的本公司营业所咨询。
※For details about other models and specifications, inquire at the nearest Koganei sales office or the Koganei overseas department.

Inner Construction

Dimensions (mm)F-APB08-6W

接头块：PTFE
Fitting block: PTFE

钢球：Sl3N4
Ball: Sl3N4

(309)
112

15(MAX)

113

M5×0.8(集尘气口)M5×0.8 (Dust collection port)
50

管：PFA
Tube: PFA

■尺寸图(mm)

66
80

■结构图

本体：
PTFE
Main unit: PTFE

70 ±3

波纹管：PTFE
Bellows: PTFE

2-φ7
(安装孔)
22
(Mounting hole)
20 31.5
111

2-M5×0.8

11

●❸

8

31

33
58

111
53 36

OUT气口 PFA管 φ6.35×φ4.35
OUT port PFA tube φ6.35×φ4.35

IN气口 PFA管 φ6.35×φ4.35
IN port PFA tube φ6.35×φ4.35

电动波纹管泵Electric Bellows Pump
F-EPB Series●接液部为特氟龙可适用于各种药液。
●波纹管方式无滑动部，几乎不产生粒子。
●吐出量、吐出速度的控制简便步进电机驱动，实现数字化的吐出量控制。

●Liquid contact area is Teflon
Capable of handling various liquid chemicals.
●Bellows method
There is no sliding portion; so generation of particles is almost non-existent.
●Simple control of dispensing volume and dispensing speed
Achieves digital dispensing volume control through operating a stepping motor.

■规格 Specifications
项目 Items
使用流体 Media型号 Models

最大吐出 Maximum dispensing volume

F-EPB08-4W

F-EPB15-3W

F-EPB40-1W

15 mℓ

40 mℓ

光刻胶、纯水、药液(可燃性物质不可) Photoresist solution, pure water, chemical solution (flammable substances not allowed)

最大吐出压力 Maximum dispensing pressure

8 mℓ

0.2 MPa

吐出流量 Dispensing flow rate
吸入流量 Suction flow rate

最大流体粘度 Maximum viscosity of media

0.1〜4 mℓ/s

0.1〜10 mℓ/s

0.1〜4 mℓ/s

0.1〜10 mℓ/s

200 cP

吐出量重复精度 Repeatability of dispensing volume
耐压 Proof Pressure
质量 Mass

100 cP±1％ F.S.
0.3 MPa
3.1 kg

3.1 kg

3.6 kg※其他型号和规格的详情请向就近的本公司营业所咨询。
※For details about other models and specifications, inquire at the nearest Koganei sales office or the Koganei overseas department.

■结构图 Inner Construction

F-EPB08-4W
268

外壳：SUS304
Case: SUS304
钢球：Sl3N4
Ball: Sl3N4

70
75

本体：
PTFE
Main unit: PTFE净化用气体输入口 M5×0.8(节流阀安装用)(连接管 外径φ4)

60

管：
PFA
Tube: PFA

Dimensions (mm)

50

接头块：
PTFE
Fitting block: PTFE

■尺寸图(mm)

112

129

Purge gas supply port M5×0.8(For throttle valve mounting)(Connection tube outer diameter φ4)

21

OUT气口 PFA管 φ6.35×φ4.35
OUT port PFA tube φ6.35×φ4.35

18

1.5

（36）

82

15

105

21

1.5

94
89
20

波纹管：
PTFE
Bellows: PTFE130

EXH M5×0.530IN气口 PFA管 φ6.35×φ4.35
IN port PFA tube φ6.35×φ4.35❹

电动CT泵

Electric CT Pump
F-EPT SeriesCT泵结构

CT pump construction【CT(Coaxial Tubephragm)泵】

是取代橡胶膜片、波纹管的
全新结构光刻胶的定量吐出泵！

【CT(Coaxial Tubephragm)Pump 】

The CT pump, a precision dispensing unit for photoresist solutions, is completely
new in construction and replaces current diaphragm or bellows construction units.

■特点 Features

低粒子结构

小型&高精度动作泵腔的气管使用了表面粗糙度Rt在0.3μm以下的超光滑NEW PFA
材质。
还通过较小的接液部表面积(波纹管泵的约1/5)几乎杜绝了粒子产生。

独特的CT泵结构带来的紧凑外观，最适于多台使用。动力源为5相步进电机，采用精密丝杠作为进给丝杠，实现了高分辨率和高重复
精度。
此外，还能够通过编码器检测由于意外事故导致的失调。

By using a smooth surface finish of Rt:0.3 μm or less, the new PFA tubes
used in the pump chamber result in almost non-particle generation due to“smaller wet surfaces” about 1/5 of current bellows type pumps.

Compact and high-precision operation

Low particle structure
液体置换特性良好泵腔为细管状，凭借几乎没有液体滞留部的理想流路形状，确保始终吐出新鲜的光刻胶。

Good replacing solution characteristic

The pump chamber is a thin tube shape. Its ideal flow path shape, withalmost no solution residue, enables dispensing of fresh resist solution.

除泡性好药液的流路始终保持由下而上的方向，即使气泡流入也会随着气流
从吐出口排出，可以不受气泡干扰地实现高精度的吐出。
此外，在装置启动时导入液体之际的空气排放也很容易，最适于容易发生气泡的液体。

The ingenious CT pump construction offers a compact appearance ideallysuited for use in side-by-side installations. A five-phase stepping motor and a
precision feed screw are used for a drive achieving high resolution andrepeatability, and an encoder will detect any potential faults, e.g. accidental“out of step”.

高可靠性的简单结构

是在同轴状的波纹管与气管间封入间接液的简单结构，为防止间接
液泄漏以及空气进入，在连接部位进行焊接以保持高精度。可靠性高于多采用密封的传统泵。

Highly reliable simple construction

Simple construction containing liquid between coaxial bellows andtube welded joint section maintains high precision due to preventing
loss of leaking liquid or air penetration. This arrangement is morereliable than current pumps using many seals.

Good removal of bubbles

The resist solution’s flow path travels from downwards to upwards.
Consequently even if bubbles enter the solution, they will be conveyed to thedischarging port and they will not affect the pump’s performance enabling it todispense with high precision. Upon start-up of equipment and pouringsolution, it is easy to remove the air bubbles from the solution and it is ideal
for solutions apt to generate bubbles.

接头块：PTFE
Fitting block: PTFE

底座：CTFE
Seat: CTFE

壳体：SUS
Housing: SUS步进电机Stepping motor编码器
Encoder

管：NEW PFA
Tube: NEW PFA节流阀(净化气体用)Throttle valve(for purge gas)

钢球：SI3N4
Ball: SI3N4●❺

注：内置了电机温度异常检测用传感器，并且还备有氮气净化用的气口。
但是，该泵并非防爆规格，用户的装置须采取充分的防爆措施。

Note: A sensor is built-in for detecting abnormal motor temperature rise anda port for supplying nitrogen purge gas is available.
This pump is not an explosion prevention type.
Consequently, explosion preventive measures will be required forcustomer site equipment where called for.

CT泵动作原理图
CT Pump Operation Principle

待机
Waiting结束

吐 出 Dispensing

Completion

波纹管中心向下方移动，
大直径波纹管收缩导致容积发生变化，经间接液
作用，使管压缩，吐出药液。

波纹管中心在设定吐出量
的位置停止。
The bellows center stops at
the settled dispensing point.

待机
Waiting

吸 入 Suction

小直径波纹管Small bellows

单向阀Check valve

波纹管中心Bellows center

管Tube

大直径波纹管Large bellows

间接液Liquid单向阀
Check valve

波纹管中心位于上限(原点)，管扩展。

The bellows center is locatedat the upper point (origin
point) and the tube is
expanded.

吸入气口
Suction port

The bellows center moves
downward and due to thelarge bellows’ compression,
the equivalent volume is now
transmitted to compress thecenter tube’s volume throughthe liquid, leading to dispenseof resist solution.

波纹管中心向上方移动，波纹管中心在上限(原点)大直径波纹管伸展导致停止，进入待机状态。
容积发生变化，经间接液
When the bellows center
作用，使管扩展，吸入药液。 stops at the upper point, theThe bellows center moves
upward and the large bellows
extend.
As the tube volume isexpanded through the liquid,
it “suck’s in” the resist
solution.

origin position is reached.

■规格 Specifications
项目 Items

使用流体 Media型号 Models

吐出量 Dispensing volume

F-EPT06A1

F-EPT10A1

光刻胶、纯水、药液(可燃性物质不可) Photoresist solution, pure water, chemical solution (flammable substances not allowed)
0.5〜6 mℓ

最大吐出压力 Maximum dispensing pressure

0.5〜10 mℓ

0.15 MPa

吐出流量 Dispensing flow rate

0.1〜4 mℓ/s

吸入流量 Suction flow rate

0.1〜4 mℓ/s

最大流体粘度 Maximum viscosity of media

200 cP

吐出量重复精度 Repeatability of dispensing volume±0.1％ F.S.

耐压 Proof Pressure

0.2 MPa质量 Mass

3.6 kg

3.1 kg※其他型号和规格的详情请向就近的本公司营业所咨询。
※For details about other models and specifications, inquire at the nearest Koganei sales office or the Koganei overseas department.

Dimensions (mm)F-EPT10A1-T1/4

175
12

151

12

165

60

50

38

4.5

5

38

50

4-安装孔
φ4.5(M4用)
4-Mounting hole
φ4.5 (for M4)

OUT气口 PFA-HG管 φ6.35×φ4.35 L＝1500
OUT port PFA-HG tube φ6.35×φ4.35 L＝1500

Purge gas supply port M5×0.8(Connection tube outer diameter φ4,
throttle valve installed.)

239

(45)

接地端子
Ground terminal

11 9
PURGE

CN-1

1.5

52

29

FG

29

54

CN-2

16

250

净化气体输入口 Ｍ5×0.8(已安装节流阀 连接管 外径φ4)1.5■尺寸图(mm)2-接口(附带) 2-Connector (included)IN气口 PFA-HG管 φ6.35×φ4.35 L＝1500
IN port PFA-HG tube φ6.35×φ4.35 L＝1500❻

定量吐出PT泵系列

Constant Dispensing PT Pump Series
F-EPP, F-APP Series●电动PT泵
可实现吐出量微调和流量设定的数字化控制。
●气动PT泵
气缸驱动型管式隔膜泵上市！

●Electric PT Pump
Enables digital control of dispensing volume fine adjustment
and flow settings.

电动PT泵
Electric PT Pump

●Air Operated PT Pump
Air cylinder operated type of Tubephragm pump is now available.

气动PT泵
Air Operated PT Pump

■特点

采用本公司独特的8字形状管与波纹管组合的PT(Parallel Tubephragm)泵结构。
・无滑动部，几乎不会因泵动作而产生粒子。
・无需像注射泵更换密封件那样的定期维护。
・药液滞留少的结构，防止光刻胶的凝胶化。
・无外部气体进入、不易发生电解液结晶化的结构。
用途例
・半导体光刻工序的光刻胶涂覆
・锂离子电池等各种电池制造工序的电解液注液
・其他药液的定量吐出用途等

Features

Employs a PT (Parallel Tubephragm) pump configuration that combines Koganei’s unique 8-shaped cross sectioned tube withbellows.
・There is no sliding portion, so generation of particles due to pump operation is almost non-existent.
・Sach as replacement of syringe pump seal and other periodic maintenance is unnecessary.
・Structure allows very little liquid chemical residues, preventing gelling of photoresist material.
・Structured for no ingress of outside air, crystallization of electrolytes rarely occurs.
Application Examples
・Photoresist liquid coating during semiconductor photolithography process・Filling main electrolyte fluid in lithium ion batteries or other types of batteries on manufacturing processes
・Constant delivery for liquid chemicals, etc.

■结构图(动作说明图)吐出工序①通过波纹管引起体积变化，外壳内容积减少。
②容积的变动量经由间接液作
用于管式隔膜，使之压缩。
③管式隔膜内为正压，OUT单
向阀(图内)打开，将药液向OUT气口侧吐出。
①T h e v o l u m e i n s i d e t h ehousing is reduced by thebellows’ volume change.
②The tubephragm iscompressed as much as adifference of the volume
through the liquid.
③The raised pressure inside
the Tubephragm opens the
OUT check valve, leading
to dispense of resist
solution to the OUT port.

●❼

Inner Construction (Operation Explanation)

吸入工序

Dispensing process

OUT单向阀
OUT check valve

波纹管：PTFE
Bellows: PTFE间接液
Liquid
管：NEW PFA
Tube: NEW PFAIN单向阀IN check valve

执行元件
Actuator

Suction process①通过波纹管引起体积变化，外壳内容积增大。
②容积的变动量经由间接液作
用于管式隔膜，使之增大。
③管式隔膜内为负压，IN单向阀(图内)打开，从IN气口侧吸入药液。
①T h e v o l u m e i n s i d e t h ehousing is increased by thebellows’ volume change.
②The tubephragm is
expanded as much as adifference of the volume
through the liquid.
③T h e l o w e r e d p r e s s u r e
inside the tubephragm
opens the IN check,leading to suction of theresist solution from the IN
port.

■规格 Specifications●电动PT泵

Electric PT Pump型号 Models项目 Items

使用流体 Media

吐出量 Dispensing volume

F-EPP05-7W

F-EPP10-2W

F-EPP50-3W

0.1〜10.0 mℓ

2〜50 mℓ

光刻胶、纯水、药液(可燃性物质不可) Photoresist solution, pure water, chemical solution (flammable substances not allowed)
0.1〜5.0 mℓ

最大吐出压力 Maximum dispensing pressure

0.2 MPa容许最大负压 Allowable maximum vacuum pressure
吐出流量 Dispensing flow rate

0.1〜4.0 mℓ/s

吸入流量 Suction flow rate

0.3 MPa−0.02 MPa

0.1〜10.0 mℓ/s

0.1〜4.0 mℓ/s

最大流体粘度 Maximum viscosity of media

0.1〜10.0 mℓ/s
200 cP

吐出量重复精度 Repeatability of dispensing volume±0.1％ (F.S.)耐压 Proof Pressure±0.5％ (F.S.)

0.3 MPa质量 Mass

0.4 MPa

2.5 kg

2.7 kg※其他型号和规格的详情请向就近的本公司营业所咨询。
※For details about other models and specifications, inquire at the nearest Koganei sales office or the Koganei overseas department.

●气动PT泵

6.4 kgAir Operated PT Pump型号 Models项目 Items

使用流体 MediaF-APP10-5W

光刻胶、纯水、药液 Photoresist solution, pure water, chemical solution

最大吐出量 Maximum dispensing volume

10 mℓ

最大吐出压力 Maximum dispensing pressure

0.15 MPa−0.02 MPa容许最大负压 Allowable maximum vacuum pressure耐压 Proof Pressure

0.3 MPa质量 Mass

1.9 kg※其他型号和规格的详情请向就近的本公司营业所咨询。
※For details about other models and specifications, inquire at the nearest Koganei sales office or the Koganei overseas department.

Dimensions (mm)

F-EPP05-7W

163
143.5
154

10.5

19

14 16.5

4-安装孔 M4用
4-Maunting hole for M418

净化气体输入口（连接管 外径φ4）Purge gas supply port
(Connection tube outer diarneter φ4)

18

54

4.5

9
4.5

OUT气口 PFA-HG管OUT port PFA-HG tube
φ6.35×φ4.35×L1000

21

23.5

49

10

1.5

115

150

165

94.5

(3)

54

接地端子
Ground terminal(接头间距)(Connector pitch)32(安装孔间距)(Mounting hole pitch)
44
50■尺寸图(mm)

IN气口 PFA-HG管IN port PFA-HG tube
φ6.35×φ4.35×L1000❽

FPD工艺用电动
CT/PT/HT泵AC伺服电机规格Electric CT/PT/HT Pump
for FPD Processes
AC Servo motor Specification
F-EPT, F-EPP, F-EPH Series
高精度定量吐出性能与定流量性能相结合。
实现波动较少的光刻胶涂布。
实现最适合狭缝涂布的性能。

电动CT泵
Electric CT Pump

电动PT泵Electric PT Pump

Constant flow rate performance has been added tothe high-precision constant dispensing performance.
Resist coating with minimal pulsing is enabled.
Achieves optimum performance for slit coating.

电动HT泵Electric HT Pump

■内部结构与部件材料 Inner Construction and Major Parts
吐出侧
Dispensing side

管：NEW PFA
Tube: NEW PFA

波纹管：PTFE
Bellows: PTFE间接液
Liquid

吸入侧
Suction side

管：NEW PFA
Tube: NEW PFA

主轴Main shaft

间接液Liquid间接液Liquid壳体：SUS
Housing: SUS

执行元件部：SUS、铝等
Actuator portion: SUS, aluminum, etc.
电机
Motor

CT泵
CT Pump(F-EPT)

电机
Motor

PT泵
PT Pump(F-EPP)HT泵HT Pump(F-EPH)■特点●拥有众多实绩的管式隔膜结构和高可靠性

采用本公司独特的8字结构、三叶结构的管式隔膜。
药液吐出部没有滑动部分，发尘量低于注射式泵。

●搭载AC伺服电机，提高了流量的控制性

除了以往的高重复吐出精度外，实现了无波动的药液吐出。
使用AC伺服电机任意控制泵的吐出速度，实现与电路板动作同步等，扩展了控制性的领域。

●不同容量的泵产品阵容涵盖了适合小型电路板用乃至大型电路板用等不同的尺寸
最大吐出量30/60/100/200/300ml，可根据各电路板尺寸进行选择。

Features●Tubephragm structure with proven performance and high reliability

Employs Koganei’s unique 8-shaped cross sectioned structure and trefoil structure tubephragm.
There is no sliding portion in the liquid chemical dispensing area; it achieves lower particle generation than syringe type pumps.

●Mounting of AC servo motor improves flow rate control performance

In addition to the established high repeatability of dispensing volume, it now offers liquid chemical dispensing without pulsation.
The AC servo motor allows control of the pump dispensing speed, enabling synchronization with movement of substrate, which
widens the scope for controllability.

●Pump capacity lineup can handle all sizes from small to large substrates

Selectable from a lineup of maximum dispensing volumes 30/60/100/200/300 ml according to substrate size.

●❾

■吐出流量特性数据示例 Example of Dispensing Flow Rate Characteristics Data
8
7
吐出压力
（kPa）
Dispensing pressure(kPa)

6
54Operating conditions
Dispensing volume 5 mR
Dispensing flow rate 1 mR/s

32

※是通过恒定节流孔发生的压力控制流量的图表。本图表
反映的是具有代表性的特性，并不保证其特性。
※The above graph shows generated pressure, analternative measure of flow rate, at a constant orifice.
This is for a representative characteristic of the pump,and not guaranteed performance.

1
0
-1
-2
-10

0

10 20 30 40 50 60 70 80 90 100 110 120 130 140 150 160 170 180 190 200 210时间（s）Time(s)■规格 Specifications型号 Models项目 Items

使用流体 MediaF-EPT30

F-EPT60

F-EPT100

F-EPT200

F-EPT300

3〜30 mℓ

6〜60 mℓ

10〜100 mℓ

20〜200 mℓ

30〜300 mℓ

光刻胶、纯水、药液(可燃性物质不可) Photoresist solution, pure water, chemical solution (flammable substances not allowed)

吐出量 Dispensing volume

最大吐出压力 Maximum dispensing pressure

0.05 MPa容许最大负压 Allowable maximum vacuum pressure
吐出流量 Dispensing flow rate
吸入流量 Suction flow rate耐压 Proof Pressure−0.02 MPa

0.05〜10 mℓ/s

0.05〜15 mℓ/s

0.05〜25 mℓ/s

0.1〜25 mℓ/s

0.1〜60 mℓ/s

0.05〜10 mℓ/s

0.05〜15 mℓ/s

0.05〜25 mℓ/s

0.1〜25 mℓ/s

0.1〜60 mℓ/s
0.15 MPa

0.1 MPa质量 Mass

9.5 kg14.2 kg

14.2 kg

28.6 kg

F-EPP200

F-EPP300

F-EPH200

F-EPH300

20〜200 mℓ

30〜300 mℓ

20〜200 mℓ

30〜300 mℓ

0.05 MPa

0.07 MPa

0.1 MPa

0.1 MPa

0.5〜20 mℓ/s

0.5〜30 mℓ/s

0.5〜20 mℓ/s

0.05〜20 mℓ/s

0.5〜20 mℓ/s

0.5〜30 mℓ/s

0.5〜20 mℓ/s

0.05〜20 mℓ/s

0.1 MPa

0.1 MPa

0.15 MPa0.15 MPa27.4 kg

29.3 kg

27.5 kg

32 kg※其他型号和规格的详情请向就近的本公司营业所咨询。
※For details about other models and specifications, inquire at the nearest Koganei sales office or the Koganei overseas department.
型号 Models项目 Items

使用流体 Media

32 kg

光刻胶、纯水、药液(可燃性物质不可) Photoresist solution, pure water, chemical solution (flammable substances not allowed)

吐出量 Dispensing volume

最大吐出压力 Maximum dispensing pressure容许最大负压 Allowable maximum vacuum pressure
吐出流量 Dispensing flow rate
吸入流量 Suction flow rate耐压 Proof Pressure
质量 Mass−0.02 MPa

※其他型号和规格的详情请向就近的本公司营业所咨询。
※For details about other models and specifications, inquire at the nearest Koganei sales office or the Koganei overseas department.

110

(199)
185
133

12
33

(552)

354

312.5

287

(7)

F-EPT100-6W(2)
ＯＵＴ气口 Ｒｃ３/８(对边距离30)
OUT port Rc3/8(Width across flats 30)(28)

Dimensions (mm)33
56

CoaxialTubephragm
Pump

68.5

KOGANEI

150.5

序列号
Serial number□42

ＩＮ气口 Ｒｃ3/8(对边距离30)
IN port Rc3/8(Width across flats 30)

30

30
239.5

■尺寸图(mm)电源线缆Power cable编码器线缆
Encoder cable

MELSERVO-J2-SUPER
厂商：
三菱电机
型号：
HC-MFS13B
Manufacturer: Mitsubishi Electric
Model: HC-MFS13B

电动RT泵

Electric RT Pump
F-EPR Series

新结构RT(Rigid Tubephragm)泵
作为管式隔膜泵的同时，实现与柱塞泵及注射泵相同的特性。

New structure:RT (Rigid Tubephragm) pump.
This is a tubephragm pump with similar characteristics to theplunger pump or syringe pump.

■特点

除了低发尘、液体置换特性良好、除泡性好等管式隔膜泵的特点之外，
还实现了传统的树脂制泵所无法达到的响应性和流量稳定性。
实现了微少量吐出的定量吐出和定流量吐出！
最适用于如下用途！！

・想改善狭缝涂布的启动速度！
・使用柱塞泵、注射泵而苦恼于粒子问题。
・流量不稳定，困扰于出现涂布不匀。

Features

In addition to low particle generatoin, good replacing solution characteristics, and good removal of bubbles of
tubephragnm pump feature higher response and flow rate stability than have ever been achieved in plastic pumps.
Enables constant dispensing and constant flow rate even in microscopic discharges.
Application Examples

・Wants to improve slit coating startup.
・Emitting particles caused by use of plunger pumps or syringe pumps.
・Flow rate will not stabilize, causing coating uniformity failures.

■内部结构与部件材料
Inner Construction and Major Parts■吐出流量特性数据示例
Example of Dispensing Flow Rate Characteristics Data
40

接头块：PTFE
Fitting block: PTFE

Operating conditions
Dispensing volume 5mR
Dispensing flow rate 1mR/s

35
吐出压力
（kPa）
Dispensing pressure(kPa)单向阀Check valve

管：NEW PFA
Tube: NEW PFA

主轴Main shaft

30
25
20
15
10
5
0

间接液
Liquid执行元件部：SUS、铝等
Actuator protion: SUS, aluminum, etc.

项目 Items型号 Models

吐出量 Dispensing volume

最大吐出压力 Maximum dispensing pressure



3

时间（s）
Time(s)4

5

6

0.1〜5 mℓ
0.1 MPa−0.02 MPa

最大吸入流量 Maximum suction flow rate

4 mℓ/s耐压 Proof Pressure

2

F-EPR05-1W容许最大负压 Allowable maximum vacuum pressure
最大吐出流量 Maximum dispensing flow rate

1

7

※是通过恒定节流孔发生的压力控制流量的图表。本图表反映的是具有代
表性的特性，并不保证其特性。
※The above graph shows generated pressure, an alternative measureof flow rate, at a constant orifice. This is for a representative
characteristic of the pump, and not a guaranteed performance.

RT泵
RT Pump■规格 Specifications

0

4 mℓ/s

0.5 MPa※其他型号和规格的详情请向就近的本公司营业所咨询。
※For details about other models and specifications, inquire at the nearest
Koganei sales office or the Koganei overseas department.

高粘度药液吐出用泵

Pump for High-Viscosity
Liquid Chemicals Dispensing
最适合聚亚胺等高粘度药液吐出。
产生气泡令人困扰！
想要减少药液的使用量！

➡

如果是简单结构的CT泵・・・

消除了加压导致的气泡溶解。
可大幅减少维护时的使用药液量。

Optimum for polyimide or other high viscosity liquid chemicals dispensing.
Bubbles keep forming.
Wants to reduce the amount of liquid chemicals used.

➡

With a CT Pump of simple structure…

Can eliminate bubbles blending caused by pressurization.
Can greatly reduce the volume of liquid chemicals used during maintenance.

■规格 Specifications
项目 Items型号 Models

吐出量 Dispensing volume

F-EPT10-16W

F-EPT10-18W
0.5〜10 mℓ

最大吐出压力 Maximum dispensing pressure

0.3 MPa

吐出流量 Dispensing flow rate

0.1〜2 mℓ/s

吸入流量 Suction flow rate

0.1〜2 mℓ/s

最大流体粘度 Maximum viscosity of media

10000 cP

吐出量重复精度 Repeatability of dispensing volume±0.5％ (F.S.)耐压 Proof Pressure

0.4 MPa质量 Mass

3.6 kg※其他型号和规格的详情请向就近的本公司营业所咨询。
※For details about other models and specifications, inquire at the nearest Koganei sales office or the Koganei overseas department.

泵单元 Pump Unit

分配单元
Dispensing Unit泵和过滤器、阀门等配管部件材料、控制元件单元化。
除了量产工序，作为试制品等的少量生产用的追加分配管
线使用也很方便！
Combines the pump, filter, valve, and other piping
materials and control equipment into a single unit.
Convenient for mass production processes, and also for
installing dispense process lines for prototypes andother small-lot production.

泵控制器
Pump Controller
1台控制器可以控制多台泵。
触摸面板操作简便！还可通过加密实现操作限制！

One controller can control several pumps simultaneously.
Touch panel offers simple operation.
Password protection enables operator restraint.

■系统示例

System Examples

气动泵的情况
For air operated pump节流阀
Speed controller空气信号Air signal

喷嘴Nozzle带回吸的气控阀Air operated valve with suck back排气阀Vent valve电磁阀Solenoid valve过滤器
Filter节流阀
Speed controller废液储罐
Waste tank

空压波纹管泵
Pneumatic bellows pump

传感器信号
Sensor signal

储罐Reservoir tank气动PT泵
Air operated PT pump

上级控制装置Upper control device

药液容器
Solution bottle步进电机驱动泵的情况For stepping motor pump电磁阀
Solenoid valve

驱动器Driver上级控制装置Upper control device空气信号Air signal

喷嘴Nozzle带回吸的气控阀Air operated valve with suck back节流阀
Speed controller

排气阀Vent valve过滤器
FilterN2净化
N2 purge废液储罐
Waste tank泵驱动信号
Pump operating signal

HOME信号、编码器信号
HOME signal, encoder signal

电动CT泵电动波纹管泵
电动PT泵
RT泵
Electric CT pump
Electric bellows pump
Electric PT pump
RT pump储罐Reservoir tank
药液容器
Solution bottleAC伺服电机驱动泵时
For AC servo motor pump节流阀
Speed controller气控阀
Air operated valve

上位控制装置Upper control device

电动CT/PT/HT泵RT泵Electric CT/PT/HT pump
RT pump

HOME信号
HOME signal
伺服放大器
Servo amplifier

限幅信号
Limit signal
电源Power supply电磁阀输出
Solenoid valve output
电磁阀Solenoid valve刹车和联锁回路
Brake and interlock circuit空气信号
Air signal

检测器
Detector
刹车装置
Brake

节流阀
Speed controller气控阀
Air operated valve

药液容器
Solution bottle喷嘴
Nozzle■相关产品介绍Introduction of Related Products

气控阀 2通阀、3通阀
Air Operated Type 2-port Valves, 3-port Valves带回吸的气控阀Air Operated Valves with Suck Back不仅具有丰富的配管规格和阀门功能，带流量调节等可选项也很丰富。
进行了小型化，进一步节省空间。

防滴液用回吸阀和2通阀一体化。
新增抑制回吸动作时的发泡现象的高粘度规格。

In addition to diverse piping specifications and valve functions,flow rate adjustment and a rich array of other options are alsoavailable.
Achieves downsizing and other space-saving measures.

手动阀Manual Valves配管规格丰富的小型手动阀。
最适合用作通风管线等的阀门。

Compact manual valve available in a richvariety of piping specifications.
Optimum valves for vent lines etc.

Combined a suck back valve, used for prevention of dripping
chemicals, and a 2-port valve, into a single unit.
High viscosity specification added to suppress bubble formation
during suck back operation.

H系列接头
H Series Fittings氟树脂制气管Fluororesin Tube Series简单连接气管，无需专用工具。

耐药品性优异，可用于各种药液。

Simple tube connection without need for
dedicated tools.

电磁阀 F系列
Solenoid Valve F Series●2位阀可以通过手动按钮的切换，实现单电磁线圈与双电磁线圈的功能选择。
●采用异径尺寸两用接头，
可连接不同尺寸的气管。
●Single solenoid valve or double solenoid valve function is selectablejust by switching the manual override at the 2-position valve.
●Employs dual-use different-size fittings in which tubes of two
different sizes can be connected.

Offers superior chemical resistance,
enabling use with various liquid
chemicals.

电磁阀 JA系列
Solenoid Valve JA Series●实现了阀宽10mm、
标准0.5W、
低电流型0.25W的低耗电。
●备有在1个阀中安装了2个3通阀的4位置3通阀。
●对应串行传输及各种省配线。
●最适用于先导操作的阀和φ40以下的气缸驱动控制等。

●Achieves low electric power consumption (standard type:0.5 W,
low current type:0.25 W) with the valve width 10 mm.
●Tandem 3-port valve is available with two 3-port valve functions in one
valve body.
●Serial transmission and various wire saving types available.
●Optimum for pilot-operated valves or for operating up to φ40 mm bore
size cylinders.



咨询电话

40086-40082

株式会社小金井●该样本为2021年6月当前数据。
●刊载的规格和外观可能会因产品改进而有所变更，恕不预先通知。敬请谅解。
●本样本使用环保油墨。

□本社
184-8533 东京都小金井市绿町3-11-28□营业本部 184-8533 东京都小金井市绿町3-11-28□海外营业部 184-8533 东京都小金井市绿町3-11-28
上海小金井国际贸易有限公司
上海市天山路600弄1号同达创业大厦2601、2602室
电话：(86)21-6145-7313
传真：(86)21-6145-7323
北京分公司
电话：
010-6461-1481
无锡分公司
电话：
0510-8270-7601
苏州分公司
电话：
0512-6818-5395
深圳分公司
电话：
0755-8606-9761
广州分公司
电话：
020-3848-3840
工厂
流通中心□上海小金井电子 (中国)□上海

日本：
http://www.koganei.co.jp
中国：
http://www.koganeichina.cn

2021年6月30日 初版 AK ©KOGANEI CORP.