ðà
X ü~mOtB[ÉæéåÊÏ½Â¿Ì
3 ³\¢ðÍ¯ì^l5198 ºÉ§²pS²p¬õs 1_1_1
övàc@lPxõÈw¤Z^[iSPring­8j §679_

ã¾N

5198 ºÉ§²pS²p¬õs 1_1_1
övàc@lPxõÈw¤Z^[iSPring­8j §679_|àWv5198 ºÉ§²pS²p¬õs 1_1_1
övàc@lPxõÈw¤Z^[iSPring­8j §679_

éØF¶5198 ºÉ§²pS²p¬õs 1_1_1
övàc@lPxõÈw¤Z^[iSPring­8j §679_ªØ¼l

5198 ºÉ§²pS²p¬õs 1_1_1
övàc@lPxõÈw¤Z^[iSPring­8j §679_v |X ü~mOtB[ÍCX ü CT ÅÍvª·é±ÆªsÂ\È½Âó¿ÉÎµÄC»Ì 3 ³\¢ðñjóÅ
vªÅ«éè@ÅéBX ü~mOtB[ÅÍC¿Ìñ]²ð X üÌõ²ÉÎµÄ¼ûü©ç 10 xXÎ³¹é±ÆÉæèCBìæèày©Éå«ÈfÊÏðÂ½Âó¿ÉÎµÄC»Ìà\¢ð½fµ½§ßeÌæ¾ªÂ\ÆÈéB»Ì§ßeðp¢ÄCvZ@ÉæèÄ\¬Zðs¤±ÆÅC½Âó¿ÌfÊð¾é±ÆªÅ«éBÁÉCvgîÂÈÇÉ¨¯é÷×\¢Ìñjó¸ÉÐÍð­ö·éè@Å±ÆªÂ\Å

Í¶ßÉ

éB

éB

úËõðp¢½ X ü CT ÅÍCX ür[Ìõ²ÉÎ

X üðp¢½C[WOÉ¨¢ÄCÅåÌÁ¥Æ¢µÄ¼ÉÈéæ¤ÉÝuµ½ñ]²Å¿ðñ]³¹é¦éÌªC»Ì§ß«ð©µ½s§¾¨ÌÌà\¢Ï±ÆÅC§ßef[^ðvª·é2,3) BúËõÍCãÃ

@Åp X ü CT uÉp¢çêÄ¢é X ü¹Éä×ÄCP

éB±Ì§ßC[WOÌN¹ÍC1895NÉgQª X üð­©µC»Ì¼ãÉBe³ê½Æ³ê

xÅévlÌèÌeGÜÅ³©ÌÚéB»ê©ç 1 ¢IÈãF»³ê½ X üÉæèªèªÂ\Å½Á½¡úÅÍCX üC[WOÍCãÃ»êðÍ¶Ìdq§xªzÈÇðèÊIÉvª·é±ÆªÂ\ÅßlXÈªìÅp³êÄ¢éBÁÉ Haunseld çªJ

éBÜ½Cªð\ X üæoíð¹p·é±ÆÉæ­µ½ X ü Computed Tomography (CT) É æé fw

èC~NI[_[ÌóÔªð\Å¿Ì 3 ³\¢

Be@ÍCiäXªÚÉ·é±ÆªÅ«È¢¿àÌððÍ·é±ÆªÂ\ÅèCwü«à­C»ªõíðp¢é±ÆÅCPé±Æ©çC¿èCñjóvª@ÆµÄ©¹lqðñjó©Â 3 ³ÅÏ@·é±ÆªÅ«é1)BX üÈ ¢ ¶ Ý Æ È Á Ä ¢ é B ú Ë õ X ü ð p ¢ ½ X ü CT

CT Ì´ÌÚ×ÉÂ¢ÄÍ{eÅÍ¤·éªCfw

ÍC»ÌóÔªð\Ì³©çCÁÉ X ü}CN CTð¾é½ßÉÍCíÌÆÈé¨ÌÉÎµÄC»ÌüÍ©

ÆÄÎêéBçBeµ½¡Ì§ßæªKvÆÈéBãÃpÌ X

X ü}CN CT ðp¢é±ÆÅCçäé¨ÌÌ 3 

ü CT uÅÍCX ü¹ÆoíªíÌÌñèðêÌÆ

³\¢ðÍªÂ\ÅÈÁÄ®­±ÆÉæèC»ÌüÍ360xûü©ç§ßæü}CN CT Ìvªðs¤ãÅCK¸l¶µÈ¯êÎÈð¾é±ÆªÅ«éBúËõðp¢½ X ü CT ÉÂ¢ÄçÈ¢ÌªCÅKÈ X üGlM[i§ß¦jÆ¿Tà´Í¯¶ÅéªCõ¹ðñ]^®³¹é±ÆÍÅ«È¢ÌÅCX ü¹_oíðñ]³¹éãíèÉCíÌ

CY¨æÑ»Ì`óÅéÆvíêª¿ÅéBµ©µCX

éBÁÉãÒÍÀ±ÎÛÉÎ·éå«È§ñÆÈéBX ü}CN CT É¨¢ÄvªÅ«éÆÈé¿ð X ür[ÉÎµÄñ]³¹é±ÆÅCãÅåÌ¿TCYÍC´IÉ X üæoíÌBÃpÌ X ü CT uÆ¯lÌ§ßæf[^ðæ¾·éìÌå«³ÉË¶·éBÂÜèCBìæèàå«È

úËõ Sept. 2013 Vol.26 No.5  257(C) 2013 The Japanese Society for Synchrotron Radiation Research¿ÌvªÉÍü¢Ä¢È¢i½¾µC[J CT4)âI

yNgð½¾PÉdËí¹ÄµÜ¤ÆCáügÌæ

tZbg CT5,6)CèÊ«ðc_µÈ¢vªÈÇÍ±ÌÀèÅÍXyNg¯mªd¡µÄµÜ¢C»ÌÜÜtt[ÅÍÈ¢jBÜ½C¿ðñ]³¹½Æ«ÉC¿ÌêGÏ·ðsÁÄà³µ¢fÊð¾é±ÆÍÅ«È¢Bê

ªBì©çÍÝo·±ÆàDÜµ­È¢BæÁÄC±ÊIÉÍCeef[^Ìt[GXyNgÉügtÌ§ñððl¶·éÆCX ü}CN CT É¨¯ézB^ðìp³¹Ä©çCÄ\¬Zitejðs¤±óàµ­Íñ]²ÉÁ½~óÌÆÅCXyNg¯mÌdÈèÉæé{PÌe¿ð}¦½¿Æ¢¤±ÆÉÈéBµ©µCÀÛÌvªÉ¨¢ÄÍCIÈ¿`óÍC

¿fÊæð¾é±ÆªÅ«éB±ÌÄ\¬@ÍtB¿`óª«ê¢È^â³te@ÆÄÎêCÅàêÊIÈÄ\¬û@Å éB

óâ~óðµÄ¢é±ÆÍÈ­C¡

GÈ`óðàÂ¿à­È­È¢BÁÉCvgîÂÉ
ã\³êéæ¤È½ÂóÌ¿ÌêC»ÌTCYÍBìÉÎµÄCy©Éå«¢êªÙÆñÇÅ

á¦ÎC¿ðñ]³¹½Æ«CéÍÍÌpxÌef[^É¨¢ÄC\ªÈ§ß­xª¾çê¸C¿Ì§ßéB³ç

îñª¾çêÈ¢êCãLÌeØfÊèÉÄÍß

ÉC±Ìæ¤È½Âó¿ÌêCñ]pxÉæÁÄÍC

ÄÝéÆC¿fÊÌ 2 ³t[GXyNgÉ¨¢¿Ì·èûüÉ¨¢Ä X üªÊß·é£ª·­ÈÄCé±ÆÅC¿©gÉæézûÉæè\ªÈ X ü§ß­óÔÉ¨¯éfÊÉ¨¢Äà»Ìe¿ª°ÉoÄ­éÌæÌf[^ª¹·é±ÆðÓ¡µÄ¨èCÀxðmÛ·é±ÆªÅ«È­ÈéBà¿ëñ±ÌêÍC

éBÜ½C¿TCYªæoíÌBìæèàÍé

¢GlM[Ì X üðp¢é±ÆÅ¿SÌÌ§ß¦©Éå«ÈêàCBì©çÍÝoµ½¿ÌîñÍðmÛ·é±ÆÍÅ«é©àµêÈ¢ªCÖSÌæÉÎ·eÌt[GXyNgÉÍÜÜêÈ¢ÌÅC¿fé X üGlM[ÌÅK»ÍsÂ\ÅÊÌîñª·×ÄÜÜê½ 2 ³t[GXyNgðéBªèÎÛÉ

ÎµÄCKxÈRgXgª¾çêéæ¤ÉÅKÈGl

¾é±ÆÍÅ«¸CÊÆµÄÄ\¬fÊÉA[`t@M[ðÉÝè·é±ÆÍCX üC[WOðs¤Ngi{Ì¿ÆÍÙÈéUèÌâmCYMÈÇjãÅñíÉdvÅ

éBæÁÄCÈãð®·éÆCXÆµÄ»êéBBìæèàÍé©Éå«ÈfÊðÂü}CN CT ÉÍC»ÌpÉÍsü«È¿`óª¶æ¤È½Â¿ÌêC»à»àÌ§ßª¾çêÈ¢ÆÝµCÁÉ½ÂóÌ¿É¨¢ÄÍ]Ìvªð»ÌÜÜ¢¤âèª¶¶é±ÆÉæèCeØfÊèÆÆçµ

Kp·é±ÆÍ¢ïÅ

í¹ÄàCX ü CT Å¿fÊðÄ\¬·é±ÆÍo

éB±Ìæ¤È½Âó¿ÉÎµÄCX ü CT Æ¯lÉC»Ìà\¢vªâ 3 ³\¢ðÍðñjóÅÂ\Æ·éè@ª X ü~mOtB[Å
é

7)B

È¢B
±Ìæ¤È½Â¿ÉÎµÄCX ü CT ÌãÖè@ÆµÄKpÅ«éè@ª X ü~mOtB[ÅéBúË{eÅÍCúËõðpµ½ X ü}CN~mOõðp¢½ X ü}CN~mOtB[ªsíêéæ

tB[Ì´©çªèÌ»óÌðàÆC¢­Â©Ìpá¤ÉÈÁ½ÌÍC2005N²ë©çÅCX ü}CN CT

ÉÂ¢ÄÐî·éBÉä×éÆärIVµ¢vª@ÅéÆ¢¦é9_11)Bµ©

µC»ÌN¹ÍÃ­CBe´ÍÕ°ÈÇÅp¢çêÄ¢X ü CT Æ X ü~mOtB[é X ügVZVXÉRµCX ü CT ÌN¹ÉàÈÁÄ¢évª@Åé12) BÜ½CX ü~mOtB[

_Åàq×½æ¤ÉCX ü}CN CT ÌªèÅÍCÍCef[^©çvZ@ÉæèfÊðßé±Æ

¿TCYÍ X üæoíÌBìæèà¬³­È©çCµÎµÎfW^gVZVXÆÄÎêé±Æà­ÄÍÈçÈ¢B[J CT âItZbg CT Ìæ¤é13)BÉCæ¿ðº°½èBÔðÎ·±ÆÉæÁÄB½Âó¿Ìæ¤ÈåÊÏ¿ÌfÊðvª·é½ßÉC

ìæèàå«È¿ÌBeðÂ\É·éè@à¶Ý·é

X ü}CN CT Æ~mOtB[ÌBêÌá¢ÍCX

ªC±±ÅÍ¿TCYÍBìæèà¬³­È­ÄÍür[ÉÎ·é¿Ìñ]²ÌX«¾¯ÅÈçÈ¢Æ¢¤±ÆðOñÆµÄbðißéBÜ¸ X üñ]³¹Ä§ßeðBe·éÆ¢¤_ÅÍ¯lÌªèèC¿ðCT ÌÄ\¬´ÉÂ¢ÄÍCeØfÊèðp¢é±@ÅÆÅð·é±ÆªÅ«é8)B¿Ì u ûü©çÌe

èTª}ð Fig. 1 É¦·BX ü}CN CT ÌêC¿Ìt[GÏ·ÉæÁÄ¾çêéXyNgÍC¿fÊÌñ]²Í X üÌõ²ÉÎµÄ¼ÉÝè³êéÌÉÎ

Ì 2 ³t[GÏ·ÉæÁÄ¾çêé 2 ³t[GµÄC~mOtB[ÅÍCoí¤É10xX¯Ä

XyNgð u ûüÅØfµ½fÊÆµ­ÈéB±Ìè

Ýè³êéB±ÌX«pÉÂ¢ÄÍCÀÛÉÍªèÎÛÌéB¼ÒÌá¢ðÈPÉ¦·½ßÉC»ê¼êÌªÉîÃ«Cef[^©ç¾çê½ 1 ³t[GX¿ÌúÝÈÇðl¶µÄè³êéBñ]²ðXÎµ½yNg©ç¿fÊÌ 2 ³Ìt[GXyNgðóÔÅ¿ðñ]³¹é±ÆÉæèC½Æ¦fÊÏªå«ì¬µC2 ³tt[GÏ·ðs¤±ÆÅC¿ÌfÊ

È½Â¿Å

ð¾é±ÆªÅ«éB½¾µCef[^Ìt[GXßð¾é±ÆªÅ«éæ¤ÉÈéBX ü}CN CT Æ

258  úËõ Sept. 2013 Vol.26 No.5

ÁÄàñ]SßTÉ¨¯éÖSÌæÌ§ðà ¡ X ü~mOtB[ÉæéåÊÏ½Â¿Ì 3 ³\¢ðÍFig. 1(Color online) Schematic drawings of (a) X­ray micro­
tomography and (b) X­ray micro­laminography. As an
example of a projection image in X­ray micro­tomography
and laminography, X­ray transmission images of a copper
mesh at the inclination angle of 0 degree (tomography) and30 degrees (laminography) are shown at the right side ofeach schematic drawing. In this case, the copper mesh was
attached at the top of an acrylic pillar.

~mOtB[É¨¯éeÌêáÆµÄC¯ê¿iANÌãÉ\èÂ¯½ºbV

Fig. 2 (a) Original image used for simulation. (b) Sectional image
obtained from X­ray tomography. (c) Sectional image ob­tained from X­ray tomography with incomplete projection
data. (d) Sectional image obtained from X­ray laminogra­
phy. The reconstructed images are perpendicular to the rota­
tional axis.

jðC»ê¼êÌvªðÅBeµ½ÛÌ§ßeð Fig. 1i»ê¼êÌTª}Ì×jÉ¦·Bñ]²ðX¯é±ÆÉæèC¿Ì§ßð¾é±ÆªoÄ¢éªCñ]²ðX¯È¢X ü~mOtB[ÌÄ\¬X ü CT ÌðÅÍCàÍâ¿Ì\¢îñð½f·é§±êÜÅq×½æ¤ÉCX ü~mOtB[ÍCfßîñÍ¾çêÄ¨ç¸C½Æ¦±ÌóÔÅÄ\¬Z

W^æZÉæèC¿Ìef[^©ç»±ÉðsÁÄàCfÊð¾é±ÆÍÅ«È¢BÜÜêéîñð³ÉfÊðÄ\z·éB»Ìû@à X

X ü~mOtB[ÌÄ\¬ÌÚ×ÉÂ¢ÄÍßü CT ÌêÆÞµÄ¢éªCñ]²ðXÎ³¹Ä¢éÅq×éªCÄ\¬æÌÈPÈärÌ½ßÉC³íÈ

½ßC§ßeÌµ¢ªÙÈÁÄ­éBÜ¸CX ü CT

X ü CT æÆep§ÀðsÁ½Ì CT is®SÌêÍCCTjCÜ½ X ü~mOtB[ðp¢ÄÄ\¬µ½ÆÉ¨¢Äñ]²É¼È 1 ³Ìef[^ª«ÌV~

[Væð Fig. 2 É¦·Bñ]²ÍCIé 1 ÂÌfÊðÄ\¬·éêC§ßeêÎæ¢BX ü CT ÌêÍC±Ì 1 ³Ìef[^ð¿WiæÌSÉ¨¢ÄCÊÉÎµÄ¼ÆÈéæÌñ]ûüÅûWµ½àÌðVmOÆÄñÅ¢éB±¤ÉÝèµ½BÈ¨C~mOtB[ÌÄ\¬V~

ÌVmOÉÜÜêéf[^ªC1 ÂÌfÊðÄ\¬·[VÅÍCIWiæÆ¯¶àÌðCñ]²Éé½ßÌ·×ÄÌîñÆÈéBêûÅC~mOtB[

ÎµÄ¼ÉÈéæ¤ÉÏÝdË½½Âó¿ðzèµÌêÍCñ]²ª X ür[ÉÎµÄX¢Ä¢é½
é 1 ÂÌfÊðÄ\¬·é½ßÌîñÍCÄ\¬½B³íÈ X ü CT ÉæéÄ\¬(b)ÅÍCIWiæßC

(a)ÉÀÈæª¾çêÄ¢éªC30xÌep§ÀfÊÌ¼að LCñ]²ÌX«ð f Æ·éÆCL~sin fiSñ]p180xÉÎµÄ1/6Ìef[^ª¹jðsÁÌcðàÂ 2 ³ÌeîñªKvÆÈéBÜ½C±½ê(c)¾ÆCãLÌæ¤Éf[^¹Ìe¿Éæè³ÌeîñÉÍCÄ\¬ðs¨¤ÆµÄ¢éfÊÈOÌî

µ¢fÊð¾é±ÆÍÅ«È¢BêûÅC~mOtñàÜÜêÄ¢é½ßCVmOÌæ¤Èl¦ûð·éB[ÌðÉ¨¯éÄ\¬(d)ÅÍCMª±ÆÍoÈ¢BX ü~mOtB[É¨¢ÄCfÊéªÌüÍÉn[Ìæ¤ÈàÌª©çêéªCep§ÀðsðÄ\¬·é½ßÌû@ÆµÄC½Z@ðp¢½è

Á½ CT æÉä×ÄIWiÉÀÈæÆÈÁÄ¢@ÈÇªñÄ³êÄ¢éª14) CÅàî{IÈû@ÍCXé±Æªí©éB½¾µC±Ì~mOtB[É¨¯éü CT É¨¯éÄ\¬Æ¯lÉCtB^â³³ê½§ßfÊÍCTª}É¦·½ÂÊÉÎµÄ½sÈfÊÅ

eðCÄ\¬ðs¤ÊÉÎµÄteðs¤û@ÅèC»êÉÎµÄ¼ÈfÊÅÍ~mOtB[ÁLÌé10,11)B

A[`t@NgÌe¿ðó¯éBÚ×ÉÂ¢ÄÍCÌX ü~mOtB[ÌÄ\¬Åq×éB

X ü~mOtB[É¨¢ÄC2 ³Ìef[^ªt[GóÔðÇÌæ¤ÉèßÄ¢­©ÉÂ¢Ä¦µ½}

úËõ Sept. 2013 Vol.26 No.5  259Ä\¬Íê©¡G»¤Év¦éªCX ü CT Æ¯lÉ®ðp¢Ä\·±ÆªÂ\Å

éB±±ÅÍC

éñ]px u É¨¯é¿Ì 2 ³§ßeð p(X, Z, u) Æ\í·±ÆÆ·éBÈ¨C±Ì 2 ³eÍCX üÌõ²ÉÎµÄ¼ÈoÊÅªè·éàÌÆ·éBFig. 3É¦·æ¤ÉC3 ³Ìt[GóÔÅl¦½êCµ§ÉÍ 2 ³ÌeÉÂ¢ÄÍ 2 ³Ìt[GtB
^Å·×«ÅÍ

éªCtevZXðô½wIÉ

l¦éÆCX ûüÉ¨¯é 1 ³ÌtB^â³ÅàßIÉÎÂ\ÅéBÜ½C~mOtB[ÌÄ\¬É¨¢ÄÍCX ü CT Ìæ¤È¢èÊ«ÍúÒÅ«È¢
Fig. 3

Schematic diagram of the three­dimensional data in Fourier
domain. Two cones along kz­axis represent missing Fourier
data in projection images.

i»à»à Missing cone Éæéf[^¹ª¶ÝµÄ¢é½ßjÌÅC»ÌÏ_©çàßðÆµÄ 1 ³ÌtB^Éæéâ³ª³êéBtB^â³³ê½ 2 ³eð P(X, Z, u) Æ·éÆCÌ®Å\·±ÆªÅ«éBð Fig. 3 É¦·BX ü~mOtB[ÅÍCef[^ÉÂ¢Ät[GóÔÅl¦éêC3 ³óÔÅl¦é
Kvª

éB3 ³t[GóÔÉ¨¢ÄC2 ³Ì§ß[ffp(X, Z, u) exp (|i2pXr)dX

P(X, Z, u)

eÌt[GXyNgÍC´_iüg 0jðÊé]~g(r) exp (i2pXr)dr(1)

2 ³XyNgÆµÄ\í³êé13) BFig. 3 É¨¢Ä¿Ìñ]²Í kz ²É½sÅ

éÌÅC2 ³XyNg

±±ÅCg(r) Í X ûüÌ 1 ³tB^ÖÅ

éBt
éÆ¢

Í kz ²©ç f X¢½óÔÆÈéBæÁÄCu ûü360x©

B^ÖÆµÄÍCX ü CT É¶½vª@Åç¾çê½ef[^Ì 2 ³t[GXyNgÍCkz¤ ± Æ Å C X ü CT Å p ¢ ç ê Ä ¢ é t B  ^ Ö ²Ìñèð f X¢½óÔÅ½µÄ¢­±ÆÉÈéBT

iShepp­Logan tB^15) â Chesler tB^16) ÈÇjðvOª\ªÅ»ÌÜÜp¢é±ÆªÅ«éB±ÌtB^â³³ê½

êÎC~mOtB[Ìef[^ª 3 ³Ìt[GóÔð½·ÌæÍCFig. 3 Éeðp¢ÄCñ]²ÌX«ðl¶µÄ u ÉÖµÄte¦·æ¤È`óÆÈéBef[^Ì 2 ³XyNg

, Y
; Z
ðs¤±ÆÅCñ]²É¼ÈfÊ F(X ) ðÄªñ]²ÉÎµÄX¢Ä¢é½ßCkz ²ÉÁÄ´_ð\¬·é±ÆªÂ\ÅÎÌÆµ½~óÌf[^¹Ìæª¶¶éB±êÍ¢íÌTvð Fig. 4 É¦·BÜ½CX«ðl¶µ½teðäé Missing cone Å®Å\·ÆÈºÌæ¤ÉÈéBèC~mOtB[É¨¯éªéBÈ¨CX«ðl¶µ½teè´ãCf[^¹ÓÆµÄð¯é±ÆªÅ«È¢B±Ì Missing cone Ìe¿ÉæèC~mOtB[ÌÄ\¬ÅÍCñ]²ðÜÞÊàÉ¨¢ÄCf[^¹Ìe¿ª°É\êCÄ\¬É¨¯éA[`t@NgÆµÄcÁÄµÜ¤Bñ]²ÌX«ª¬³­ÈêÎCMissing cone

f

F(X 
, Y
; Z
)

2p
0

P(X, Z, u)du,{ZX sin f sin u|Y sin f cos u{Z cos f
XX cos u{Y sin u(2)ÌÌÏà¬³­ÈèCX«ÌÈ¢ X ü CT Ìðif0jÅÍC3 ³t[GóÔªef[^ÉæÁÄßçêÈ¨CX ü}CN CT ÌÄ\¬ÅÍC¿ð§ß·é X

é±ÆÉÈéBÜ½tÉCúÝÌ

ür[Í½sõÅé¿ÅÍC¿Ì§ßð¾é½ßÉñ]²ÌX«pªå«­Èéæ¤ÉÝèéÆÝÈ·±ÆÅC¿ÉÎµÄ

180xªÌñ]ÍÍÅÌef[^ª

êÎ\ªÅ

Á

éªiá¦Î f40xjC±ÌêÍ Mis­

½Bµ©µCX ü~mOtB[ÅÍCFig. 4 É¦·æsing cone ÌÌÏªå«­ÈèCA[`t@Ngàæè­¤ÉCÄ\¬ðs¤ÊÉÎµÄÎßÉte·é±ÆÉÈ³êé±Æª­\êéXüª

éB±êçðl¶·éÆCX ü~m

é½ßC¿ÉÎµÄ180xªÌñ]ÍÍÌef[^ÅOtB[ÍCX ü CT ÌðÅÍeªvªsÂ\ÈÍs\ªÅêÉ¨¢ÄC»êÉãíÁÄt[GóÔf[^ðg

f[^ðæ¾·éKvªéöxhßé±ÆªÅ«éè@ÅéÆð·é±ÆªÅ«éBèC¿ÉÎµÄ360xªÌñ]ÍÍÌeéBÄ\¬ÉæÁÄ¾çêéf

Ê F ÍCX 
_Y 
ÊÉ½sÅ

èCZ 
²ûüÅÄ\¬ðX^bNµÄ¢­±ÆÉæèC3 ³Ìf[^ð¾é±Fig. 3 É¦·æ¤ÉCt[GóÔðèßéf[^ÌæÆªÅ«éBÜ½Cñ]²ÌX«ð¬³­µÄ¢­ÆCXªÁÙÈ`ÉÈéÌÅCX ü~mOtB[É¨¯éü CT ÌÄ\¬ÉßÃ«CãLÌ®(2)É¨¢ÄCf0 Æ

260  úËõ Sept. 2013 Vol.26 No.5

ðà ¡ X ü~mOtB[ÉæéåÊÏ½Â¿Ì 3 ³\¢ðÍFig. 4(Color online) (a) Coordinate system used in thelaminography measurement. (b) Schematic diagram of the
backprojection procedure in the laminography reconstruc­tion.

·éÆCX ü CT É¨¯éÄ\¬»ÌàÌÆÈéB
ãLÌÄ\¬®ðp¢ÄCÀÛÉ~mOtB[ÌðÅªèðsÁ½eXgTvÌÄ\¬ÉÂ¢Ä¦·B
eXgTvÍC2 ÌºbV
güèbV

C#1000bV

i#400At@xb

Fig. 5jðJvgtBÌXy[T[ðîµÄdË½àÌÅ(a) Projection image of piled­up copper meshes. Sectional
images of copper meshes (b, c) parallel and (d) perpendicu­
lar to the mesh plane.

éBñ]²ÌX«p f

Í30xÉÝèµ½B±ÌÆ«ÌªèÉ¨¯é X üGlM[Í25 keV ÅéBoíÉÍCÂõÏ·^Ìæ±Æªí©éBêûÅCFig. 5(b)¨æÑ 5(c)É¦µ½Ä\oíir[j^[jðp¢½BúËõðp¢½ X¬ÉÎµÄ¼ûüÌfÊiX _Z Êjð Fig. 5(d)É

üC[W OÀ±Å WIÉp ¢çêé oíÅ¦·B±ÌûüÌfÊÅÍCFig. 3 É¦µ½ 3 ³t[é2)Br[j^[iAA50Cl¼zgjNX®ïÐjGóÔÉ¨¯é Missing cone Ìe¿ÉæèC¼ûüÉüËµ½ X üÍCLSO uõÌÉæÁÄÂõÉÏ·³Ì«Eªªs¾ÄÉÈÁÄ¢éBÜ½CFig. 4 É¦·æ

êC~20{ÌÎ¨YÉæÁÄ CCD JiC4880_, Y
¤ÉCF(X ) Å\í³êéÄ\¬ÊÉÎµÄte

41S, 4000~2624 pixelsCl¼zgjNX®ïÐjÌf

ðsÁ½ÛÉ¶¶½Xg[NóÌA[`t@Ngà©çqÉ³êéB±ÌÆ«ÌÀøsNZTCYÍ0.25mm ÅÅèCBìÌå«³Í 1 mm(H)~0.66 mm(V)éBÀÛÌªèÅÍC2~2 rjOi0.5 mm/pixelC

2000~1312 pixelsjÅªèðsÁ½B
~mOtB[ðÅBeµ½eXgTvÌe

êéB±ÌA[`t@NgÍCteðp¢½~mO
tB[ÌÄ\¬É¨¢ÄêÊIÉ©çêéàÌÅ

éBÈãðÈPÉ®·éÆCX ü~mOtB[ÌªèÉ¨¢ÄC¿Ìñ]²ÉÎµÄ¼ÈfÊÅÍCär
IÇDÈæª¾çêéÌÉÎµÄC»êÉ¼ÈfÊÅ

ð Fig. 5(a)É¦·BeÌiKÅÍC2 ÌbV

ÍC~mOtB[ÁLÌA[`t@NgÌe¿ðó¯ªdÈÁÄe³êÄ¢éBÉãLÌÄ\¬®ðp¢

éB

, Y
ÄCñ]²ÉÎµÄ¼ÈfÊiF(X jjÉÂ¢ÄÄ
\¬ðsÁ½Êð Fig. 5(b)¨æÑ 5(c)É¦·B±ÌÆ«ÌeÍ3600e/360xÅèCebVéBÄ\¬ÉæÌfÊðÆ§µÄ¾é±ÆªÅ«Ä¢éúËõ Sept. 2013 Vol.26 No.5  261

Fig. 6

(Color online) Photograph of a sample stage used for the X­
ray micro­laminography measurement. The incident X­raybeam comes from left to right. The inclination angle of therotational axis is represented as f. A at sample set on thesample stage is a printed board. Inset shows the enlarged im­age of the sample holder.

X ü~mOtB[ÌåÊÏ½Â¿ÖÌpÀÛÌ~mOtB[ªèÉ¨¯é¿Xe[WÌÊ^ð Fig. 6 É¦·BTª}Å¦µ½æ¤ÉC¿Ìñ]²

Fig. 7(Color online) (a) Photograph of a ip­chip test board.
Slice images of solder bumps (b) parallel and (c) perpen­
dicular to the board plane, respectively.

ª X ür[ÉÎµÄ¼ûü©çX¢Ä¢élqªí©éBÊ^ÅÍC{[xAOÌñ]Xe[WiSPU_1C_Ã¸@®ïÐjðp¢Ä¢éBX ü~mæÁÄC­ÍÈúËõðp¢½~mOtB[vªÅCOtB[ÌªèÅÍCñ]²ðXÎ³¹é½ßCXÎÉ

ANð¿z_[ÆµÄp¢½êÅàCªèÉ¨º¤ñ]Ì²ÌÎcðh®½ßÉC²óÉ{[xA¯éáQÆÈé±ÆÍÙÆñÇÈ¢BÜ½CANÌæOðp¢½ñ]Xe[WªKµÄ¢éBÜ½Cñ]²Ì¤ÈÀ¿ÅÁHµâ·¢Þ¿ÌêCªè²ÆÉVµ¢XÎÉæèC½Âó¿ðx¦é¿z_[iñ]X¿z_[Öð··é±ÆàÂ\Åe[WÆ¿ðq®xjð X ür[ªÊß·éBX ü§ßÌÞ¿ÆµÄp¢é±ÆªoéBèCåªÌªèÅ]ÁÄC¿z_[ÉæÁÄ X üªzûðó¯C§ßX ü~mOtB[ÌAvP[VÆµÄCt­xªå«­áº·éÌðh®½ßÉC^JÌæ¤Èà®

bv`bvÍñ¾ÚÌñjó¸ÞÉÂ¢ÄÐî·z_[ðp¢é±ÆÍoÈ¢Bà®z_[ÌãíèéB±ÌÌOÏÊ^ð Fig. 7(a)É¦·B±Ì±ÌÍC

ÉCANÌæ¤ÈvX`bNÞð¿z_[Æµ10.04 mm pÌ Si `bvª52.55 mm~30 mm Ì FR_4 îÄp¢é±ÆÅCz_[ÉæézûÉº¤­xáºðÉÂÉ Sn_3.0 wt÷Ag_0.5 wt÷Cu t[Íñ¾Åtba·é±ÆªÅ«éBÊ^ÅÍC¿z_[©gÌ­xv`bvÚ³êÄ¨èCÍñ¾ovÉ«ôðiW³¹ðÛÂ½ßÉC^J»ÌbhÌãÉ X ü§ß«Ì

é½ßÉCMTCN×ªÁ¦çê½àÌÅ

¢AN»Ì¡ïðæèt¯C»ÌãÉ¿ðÝuµÄêCªèÎÛÆÈéÌÍCSi `bvÆîÂðtbv¢éiFig. 6 Eº}ü}jBµ©µÈªçCANÌæ¤`bvÚµÄ¢éÍñ¾ovÅÈL@fÞÌêCúËõ X üCÁÉAW

vÌå«³Í¼añ120 mm Å

[^õ

éB±Ì

èC1 ÂÌÍñ¾oéB±êÍCîÂTC

Ìæ¤ÈPx X üð¯¶êÉÆËµ±¯éÆCúË

YÉä×ÄÍé©É¬³­CÜ½MTCN×ÉæÁÄü¹Ìe¿i¶¶½«ôÍæè×©¢àÌÅFC\¢jóÈÇjª»ênßéBK¢éÌÅC~NI[

È±ÆÉCX ü~mOtB[ÌªèÅÍCX üÆË_[ÌóÔªð\Åvª·éKvªC¿ÍíÉñ]µÄ¢é±ÆÉÈéÌÅC¿z\æoíÅªè·éKvªéBæÁÄCªð

éªCóÔªð\Æg_[Ìê©É­ÍÈ X üª½è±¯é±ÆÍÙÆñ
ÇÈ¢BÜ½C±ÜßÉVb^[ÉæèsKvÈ X
üÆËðh®±ÆÉæèCz_[Ì·õ½»à}êéB

262  úËõ Sept. 2013 Vol.26 No.5

Þtbv`bvÍñ¾ÚæñxR§HÆZpZ^[ ÞJ_VC²RFðà ¡ X ü~mOtB[ÉæéåÊÏ½Â¿Ì 3 ³\¢ðÍ[hItÆÈéÌªBìÅèCå«ÈîÂÌÜÜ

X ü}CN CT ÉæéªèÍsÂ\ÅéB]ÁÄCñjó©Â 3 ³ÅÏ@·éÉÍCX ü~mOtB[

ZTCYÉË¶·éBÂõÏ·^ÌæoíÅªð\ªèÆµ½êÌÀøsNZTCYÍCTË0.5~
NöxÅ

éiLøìÍ»Ì2000{öxjBæÁÄC

ÉæéªèªsÂÆÈéBîÂÉÎµÄ½sÈÊÅÄ\X ü}CN CT â~mOtB[É¨¯éóÔªð\¬ðsÁ½Íñ¾ovACÌfÊð Fig. 7(b)É¦Í 1`~NÅèCTu~NÌóÔªð\ªK·BsNZTCYÍ0.5 mm ÅCÄ\¬ìÍ 1 mm~1vÈêÍC^°÷¾ðp¢éKvªmm Å

éBÜ½C±ÌÆ«Ì¿Ìñ]²ÌX«Í20

÷¾ÅÍCtl][v[gÌæ¤ÈfqÉæxÅéBîÂÌå«³ÉÎµÄñíÉ¬³¢ÂXÌÍñ

ÁÄgå³ê½¿ðo·é±ÆÉÈéÌÅCæ

éB^°¾ovÆ»ÌÌ{ChÈÇð¾ÄÉÏ@·é±ÆªÅè¬³ÈÀøsNZTCYÅªè·é±ÆªÂ\Å«éBÍñ ¾ovà É_Ý·é P_Í Ag3Sn ÅèCTu~NÌóÔªð\ðB¬·é±ÆªÂ\ÆÈéBÜ½CFig. 7(b)Ì_üÉ¨¢ÄCîÂÉÎµÄ¼ûéBX ü CT ÅÍCõwnðp¢é±ÆÅC·ÅÉTüÌfÊð Fig. 7(c)É¦·BÍñ¾ovÌãºÉ¨¢

u~NóÔªð\Å 3 ³ñjóªèªsíêÄ¢ÄCÁLÌA[`t@NgÌe¿ª©çêéªCîÂÉÎ

é17)Bõwnðp¢é±ÆÅCX ü~mOtB[ÉµÄ[³ûüÌÍñ¾ovàÌîñðñjóÅÏ@·é¨¢ÄàTu~NÌóÔªð\ðB¬·é±ÆªÂ\±ÆªÅ«Ä¢éBÅé18) B±±ÅÍC][v[gðp¢½^~mOtB[ÉæéªèÊÉÂ¢ÄÐî·éBõwn

^ X ü°÷¾É¨¯é~mOtB[ªèÌÚ×ÉÂ¢ÄÍ¤·éªCSPring­8 É¨¯é][±êÜÅÐîµ½ X ü~mOtB[ÍC¿Ì§¢ÄÍ¶£i17, 19, 20jðQÆµÄ¢½¾«½¢Bgpv[gðp¢½õwn¨æÑfqÌÚ×ÉÂ

ßæð»Ì¼ãÉÝuµ½ X üæoíÅBe·é

µ½][v[giNTT_AT ®ïÐjÍCÅOÖÑ

¢íäége^hõwnÉæéàÌÅ

100 nm ÅÁ½Be^õwnÌêCBµ¤éóÔªð\ÍCæoíÌsN

Fig. 8èCõwnÌ{¦Í30{ÅéBoíÍCÂõÏ·^ÌæoíiAA40P{C4742_98_(Color online) Microscopic slice images of diatomite powder (a) parallel and (b) perpendicular to the silicon ni­
tride membrane. (c) Line prole of ne structures in the largest diatom located at the center of the image. (d) 3Dview of diatomite powder set on the silicon nitride membrane. Drishti was used as rendering software.

úËõ Sept. 2013 Vol.26 No.5  263

24ACl¼zgjNX®ïÐjÅèCJYn×Ä©Èèå«­Èéi¯¶eÅärµ½ê L~éBsin f {CL ÍÄ\¬fÊÌ¼ajBæÁÄCf[^vªCõwnÌ{¦ðl¶·éÆC¿ÊÉ¨¯éÀøsNZ

æÄ\¬ÌV[PX©ç¬éªèÌnCX[vbgðl¶µ½ÀøsNZTCYÍ4.3 mm/pixel ÅTCYÍ0.143 mm/pixel ÆÈéB±ÌÆ«Ìªèð»ÉÍCßNÌªèZpÌx»Éº¤vªÔÌåÈÉ¨¯é§ßÌìÌå«³Í¿ÊÉ¨¢Ä132 mm

Zkðl¶·éÆCvªãÌf[^ð¢©É¬Å·(H)~86 mm(V) ÆÈéBé©ªJMÆÈéB±Ìæ¤ÈfW^æÉ¨¢½Âó¿ÆµÄC±±ÅÍ»VRãiuÄC»ÌÉïâ³êéÔÌíÞÍå«­ 2 ÂÉª

TCYF1 mm~1 mmCúÝ500 nmjÉÚ¹½÷¬¯çêéB1 ÂÍCæf[^t@CÌüoÍÔÅC¿ÌªèðÝ½B»VRÍCúËüÏ«àà¤ 1 ÂÍCÀÛÌÄ\¬ZÉ¨¯éfW^f[^­C÷¬¿pÌz_[ÆµÄµÎµÎp¢çêéªCÌÔÅéBX ü~mOtB[ÅÍC1 ÂÌfÌÜíèÉVRt[iVRt[TCwðÄ\¬·é½ßÉKvÈef[^ÊÍCªèð

YF5 mm~5 mmCúÝ200 mmjª¶Ý·é½ßCÉàËéªCMKoCgiGBjI[_[ÉyÔiX ü^ CT Éæé 3 ³vªpÌ¿z_[ÉÍü¢Ä¢ÈCT ÌêÍ 1 XCX¢BæÁÄC»VRÉÚ¹½÷¬¿àC

©É±ÌcåÈÊÌf[^ðÇÝÝ·é©ªC¬éÓ½è10 MB OãjBæÁÄC¢¡ÅÍ½ÂóÌ¿ÆÝÈ·±ÆªÅ«éB÷¬¿ÉÌ®ÆÈéBÅßÅÍCåeÊÌ Solid State DriveÍC]yÌ²ðp¢½B¿²®ÅÍÁÊÈ±ÆÍs( SSD ) ª á R X g Å  p Â \ Åí¸C»VRãÉ¿ðg½¾Ú¹½h¾¯Å

Disk Drive (HDD) Éä×ÄCñíÉ¬¢ÇÝÝªÀ»éiòUh~Ì½ßC

Å«Ä¢éB~mOtB[ÌÄ\¬É¨¢ÄÍCeHðçµ½ãÅC©R£³¹½jB^ CT ÌvªÅÍC¿ðìàÉûßé½ß

f[^ÌÇÝÝÊªcåÅ

ÉC×­ø«LÎµ½Ls[ât@Co[@ÛÌæsÂÅè C ê Ê I È Hardé½ß SSD ÌpÍKvéÆ¢¦éBêûÅC2 ÂÚÌfW^f[^éª21) C~mO

ÌZÍCá¦ÎéZð2048~2048~1024sN

tB[ðp¢½ã¿ÌªèÅÍCxÈZpðv·éZÅ\¬³êé{[f[^Ì·×ÄÌ{NZÉ¿²®ÍsvÅ

éB»VRÉÎµÄ½sÈfÎµÄs¤êC±ÌZ¾¯Å40­ñÈãÌðsÊC¨æÑ¼ÈfÊð»ê¼ê Fig. 8(a)¨æÑ 8(b)É¤±ÆÉÈéBÀÛÌÄ\¬ZÅÍC±Ìæ¤È[Éæèt¯çê½è·é±Æª¦·BÜ½C»VRÉÎµÄ¼ÈfÊÉ¨¯[vª¢­ÂàÜÜêéBæÁÄC±êçÌ[véC]yÌ÷×\¢Ìvt@Ci}îóÅ¦µ½ð¬©Âø¦Ç­·éKvªéBC ¾êÌæ

ÍÍjð Fig. 8(c)É¦·BK¥IÈ\¢ÌüúÍñ0.72~¤ÈvO~OÂ«ðp¢ÄÄ\¬pÌ\tgEGA

NiæãÅ 5 sNZªjÅðJ­·éêC»ÌÍî{IÉÍVOXbh

èCTu~NéªCßNÌ}`RA CPU ÅÍCvZbTàÉüúÌ\¢ðvªoÄ¢é±Æªí©éB±ÌêCÅ~mOtB[ÁLÌA[`t@NgÍ»êÙÇ­­æ¨¯é¡ÌXbhð¯Ép¢½}`XbhZ

Ée¿µÄ¢È¢i­¢Xg[NóÌA[`t@NgÉæèðs¤±ÆªÂ\ÅÍCobN OEh Æ¿Ìz ûWÌ· ÉË¶·ðs¤êÅàCVOXbhÉä×Ä¬ð·

éB±êÉæè¯¶éjBÜ½CFig. 8(d)É¦·æ¤ÉC»VRãÉ

é±ÆªÂ\ÅÚ¹½¿ðC3 ³Åvª·é±ÆªÅ«Ä¢éB±ê(GPU) ðp¢é±ÆÅCÀñZðÀ»·é±ÆàÍ X ü~mOtB[Ì{ÌÚIiåÊÏ½Â¿Â\ÅÌvªj©çÍ½­íE·éªCX ü CT pÉ¿²®ªÅC«\ÈrfIJ[hª[X³êÄ¨èCC ¾êéBêûÅCGraphic Processing UnitéBÅßÅÍCNVIDIA ÈÇ©çCärIÀ¿é CUDA ÆgÝí¹é±Æ¢ïÈêÉ¨¢ÄC¿²®ÌÈÖ»ª}êéÆ¢¤VÉ¨¯éJ­Â«Å½Èm©ª¾çêÄ¢éBÅCÀñZðÈPÉs¤±ÆªÅ«é22) B»ÝÅÍC~mOtB[Ä\¬ZpÌ\tgEGAÍC

X ü~mOtB[Ä\¬ÌÀÛX ü~mOtB[ÌÄ\¬ZÍCX ü CT ÌÄ\¬Æ¯lÉCfW^f[^Å

CUDA ðp¢é±ÆÅCGPU É¨¯éÀñvZðWp·éæ¤ÉJ­µÄ¨èCÂ\ÈÀè¬Åf[^ªs¦éÂ«ð®¦Ä¢éBèCeæðlf[^ÆµÄæèµ¤±ÆÉæèCfwÌÄ\¬ðs
¤B æÁ ÄCX ü ~m O tB[ ÌÄ \¬ É¨ ¢Ä¨íèÉÍCOqÌlvZ®ðÀs·é±ÆªÅ«éêpÌ\t{eÅÍCúËõ X üðp¢½ X ü~mOtB[

gEGAÌJ­ªKvÆÈéBX ü~mOtB[ÌÌî{IÈTOÆ¢­Â©ÌpáÉÂ¢ÄÐîµ½BX

êC1 ÂÌfwðÄ\¬·é½ßÉKvÈf[^Êü~mOtB[ÍCX ü CT ÅÍªèsÂ\È½ÂóÍCÄ\¬Ì´Åà¦µ½æ¤ÉCX ü CT ÌêÉä¿ÌñjóvªÉp¢é±ÆªÂ\Å

264  úËõ Sept. 2013 Vol.26 No.5

é±Æð­²µðà ¡ X ü~mOtB[ÉæéåÊÏ½Â¿Ì 3 ³\¢ðÍÄ«½ªCX ü CT Æ¹p·é±ÆÉæèC¿`óÉË_[Ìì¬ÈÇCr[CeNjJX^btÌ¶µÈ¢ 3 ³\¢vªÌÂ\«ð©o·±ÆªoéBm÷ÉT|[gµÄ¢½¾¢½B±Ìêð¨ØèµÄ¨

X ü CT â~mOtB[ÌÅåÌÁ¥ÍC¿ðÁH

ç\µã°Ü·B·é±ÆÈ­CñjóÅ\¢vªªÅ«é_Å

éB·×

Ql¶£

ÄÌ¿ÉÎµÄCX ü CT ªKpÅ«éÌÉzµ½±ÆÍÈ¢ªCÇ¤µÄàªèª¢ïÈóµà¶Ý·éB»ÌóµÅCCT vªpÉ¿ðÁH·éÌÍCñjóvªÆ¢¤Ï_©ç©êÎ{]|ÅèC{ÅÜÌ`óÉóÔÅªè³êé×«Å

êÎ»ÌÜ

2)

éB»Ì_ÅCX

ü~mOtB[ÍCå«ÈfÊÏðàÂ½Âó¿ð
¬³È¬ÐÉÁH·é±ÆÈ­ªè·é±ÆªÂ\ÅèCÁLÌA[`t@NgÌe¿Íó¯éªCep§ÀðsÁ½ CT Éä×ÄCIWiÉß¢Ä\¬ð¾é
±ÆªÂ\Å

1)

éBÜ½C{eÅÐîµ½ X üõwnÉ¨¯é~mOtB[ÅÍC^ CT ÅÍvª¢

3)
4)
5)
6)

ïÈãÉÚ¹½¿Ì 3 ³C[WOªs¦é±Æª©¢¾¹Ä¨èC^ CT pÉ²®ª¢ïÈ¿É7)ÎµÄC»Ì 3 ³C[WOÌÂ\«ð¦·±Æª8)Å«Ä¢éBÜ½CãÉ|{µ½×EÈÇð»ÌÜÜª
è·é±ÆàÂ\ÅèCÊîñðp¢½C[WO

9)@ÆgÝí¹é±ÆÉæèC»Ì 3 ³IÈ§Ì\¢ððÍÅ«éæ¤ÉÈéÌÅÍÈ¢©ÆúÒ³êéB

10)

úËõ X üðp¢½ X ü}CN CT ¨æÑ X ü}C
N~mOtB[Ívªè@ÆµÄñíÉß¢è@Å
èCvªõwnð\z·éãÅàC¿Ìñ]²ð X

11)

üÌõ²ÉÎµÄ¼ÉÝu·é©X¯ÄÝu·é©Ìá

12)

¢¾¯Å

13)

éBÀÛÉ»Ì²®É¨¢ÄàCCT õwnÅoíÉÎ·éñ]²ÌX«âñ]SÈÇêÊè²®ðµ½ãÉCOqÌæ¤Éñ]²ð]ÌX«ÉÈéæ¤É14)

Ýè·é¾¯ÈÌÅC¼ÒÌØèÖ¦ÍeÕÅ

15)

éÆ¢¦

éBµ©µÈªçCX ü CT Éä×Ä X ü~mOt
B[ÌFmxÍÜ¾Ü¾á­Cpáà­È¢Ìª»óÅ16)éBñjó\¢vª@ÆµÄC¡ã½ûÊÅ X ü~17)

mOtB[ªp³êÄ¢­±ÆðúÒ·éB18)Ó«{ e Å Ð î µ ½ ª è f [ ^ Ì ê  Í C SPring­8 ¤ p

19)r[CÛèIèÏõÌ³FÌàÆÅsíê½

20)

i2008B1525, 2009B1498jBÜ½C{eÅÐîµ½tb21)v`bvÍñ¾ÚÉ¨¯évªf[^ÍCxR§HÆ
ZpZ^[ÌÞJ_VC²RFÉñµÄ¢½¾¢½B~mOtB[vªðs¤É½èC¿z

22 )G. N. Hounseld: British Journal of Radiology 46, 1016
(1973).
K. Uesugi, Y. Suzuki, N. Yagi, A. Tsuchiyama and T.
468, 853
Nakano: Nucl. Instrum. Methods Phys. Res. A 467_
(2001).
K. Uesugi, M. Hoshino, A. Takeuchi, Y. Suzuki, N. Yagi and
T. Nakano: AIP Conf. Proc. 1266, 47 (2010).
A. Faridani, D. V. Finch, E. L. Ritman and K. T. Smith:
SIAM Journal of Applied Mathematics 57, 1095 (1997).
F. Jian, L. Hongnian, L. Bing, Z. Lei and S. Jingjing: Nucl.
Instrum. Methods Phys. Res. A 575, 519 (2007).
S. A. McDonald, F. Marone, C. Hinterm äuller, G. Mikuljan,
C. David, F. Pfeier and M. Stampanoni: J. SynchrotronRad. 16, 562 (2009).
S. Gondrom, J. Zhou, M. Maisl, H. Reiter, M. Kr äoning and
W. Arnold: Nucl. Eng. Design 190, 141 (1999).
Ö¡PYFæASYißãÈwÐC1993jC
p103.
L. Helfen, T. Baumbach, P. Mikulák, D. Kiel, P. Pernot, P.
Cloetens and J. Baruchel: Appl. Phys. Lett. 86, 071915(2005).
L. Helfen, A. Myagotin, P. Mikulák, P. Pernot, A. Voropaev,
M. Elyyan, M. Di Michiel, J. Baruchel and T. Baumbach: 82,
063702 (2011).
M. Hoshino, K. Uesugi, A. Takeuchi, Y. Suzuki and N.
Yagi: AIP Conf. Proc. 1365, 250 (2011).
D. G. Grant: Biomedical Engineering, IEEE Transactions
on, BME_19, 20 (1972).
J. T. Dobbins III and D. J. Godfrey: Phys. Med. Biol. 48,
R65 (2003).
S. Harasse, W. Yashiro and A. Momose: Optics Express 19,
16560 (2011).
L. A. Shepp and B. F. Logan: IEEE Trans. Nucl. Sci. NS_
21, 21 (1974).
D. A. Chesler and S. J. Riederer: Physics in Medicine andBiology 20, 632 (1975).
A. Takeuchi, K. Uesugi, H. Takano and Y. Suzuki: Rev. Sci.
Instrum. 73, 4246 (2002).
M. Hoshino, K. Uesugi, A. Takeuchi, Y. Suzuki and N.
Yagi: Re. Sci. Instrum. 82, 073706 (2011).
A. Takeuchi, K. Uesugi and Y. Suzuki: J. Phys. Conf. Series
186, 012020 (2009).
Y. Suzuki, A. Takeuchi, K. Uesugi and M. Hoshino: AIP
Conf. Proc. 1365, 160 (2011).
K. Uesugi, A. Takeuchi, M. Hoshino and Y. Suzuki: AIP
Conf. Proc. 1365, 309 (2011).
NVIDIA CUDA z [  y [ W F http:// www.nvidia.com /object/cuda_home_new.html

úËõ Sept. 2013 Vol.26 No.5  265

ÒÐî
¯ì^l

övàc@lPxõÈw¤Z^[p¤£iå ¤õE­mail: hoshinospring8.or.jpêåFX üC[WO
mªðn
2008N}gåwåw@¨¿Èw¤ÈmÛöC¹CHwmB2008N_2009NPxõÈw¤Z^[¦Í¤õB
2009N 4 æè»EBã¾N

övàc@lPxõÈw¤Z^[p¤£iå ¤õE­mail: uekenspring8.or.jp
êåF}CNgOtB[Æ»Ìpmªðn
2000N 3 HÆåwåw@Hw¤ÈmÛöÞB2000N 4 »EB|àWvövàc@lPxõÈw¤Z^[p¤£iå å²¤õE­mail: takespring8.or.jpêåFX üõwCX üC[WO
mªðn
1999N}gåwåw@Hw¤È¨HwêUmãúÛöC¹CHwmB
1999N_2001NPxõÈw¤Z^[¦Í ¤õ B2001N _2005N¯ ¤õ B
2005N 4 æè»EB

266  úËõ Sept. 2013 Vol.26 No.5

éØF¶övàc@lPxõÈw¤Z^[p¤£iå åÈ¤õE­mail: yoshiospring8.or.jpêåFX üõw
mªðn
1978NåwîbÈwÈ²B1984N¯wn¤ÈÖ»wmC¹B1984
1997Nú§»ìB1997N©ç»EB
N_

ªØ¼l

övàc@lPxõÈw¤Z^[p¤£iå R[fBl[^
E­mail: yagispring8.or.jpêåFñ» X üñÜwCX üC[WO
mªðn
1975Nåw¨HwÈ²B1980N
k å w ã w   è B 1982 N ã w  m B
1990NkåwãwutB1997NæèPxõÈw¤Z^[Bðà ¡ X ü~mOtB[ÉæéåÊÏ½Â¿Ì 3 ³\¢ðÍThree­dimensional structural analysis of laterally
extended objects using X­ray laminography
Masato HOSHINOJapan Synchrotron Radiation Research Institute (SPring­8)
1_1_1, Kouto, Sayo­cho, Sayo­gun, Hyogo, 679_5198 Japan

Kentaro UESUGIJapan Synchrotron Radiation Research Institute (SPring­8)
1_1_1, Kouto, Sayo­cho, Sayo­gun, Hyogo, 679_5198 Japan

Akihisa TAKEUCHI

Japan Synchrotron Radiation Research Institute (SPring­8)
1_1_1, Kouto, Sayo­cho, Sayo­gun, Hyogo, 679_5198 Japan

Yoshio SUZUKI

Japan Synchrotron Radiation Research Institute (SPring­8)
1_1_1, Kouto, Sayo­cho, Sayo­gun, Hyogo, 679_5198 Japan

Naoto YAGIJapan Synchrotron Radiation Research Institute (SPring­8)
1_1_1, Kouto, Sayo­cho, Sayo­gun, Hyogo, 679_5198 Japan

Abstract

X­ray laminography is a promising technique for measuring the three­dimensional structures inlaterally extended objects without destruction. In X­ray laminography, the rotational axis of theplanar sample is inclined from the direction perpendicular to the optical axis of an X­ray beam. Ac­
cordingly it becomes possible to obtain projection images of the object even if the cross section ismuch larger than the eective eld of view of the detector. Since the projection images include
the inner structural information of the sample, the sectional image is reconstructed from them.
This imaging technique can be a powerful tool for the non­destructive inspection such as thethree­dimensional visualization of micro­structures in a printed board.

úËõ Sept. 2013 Vol.26 No.5  267