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Fig. 12(Color online) Focused beam proles measured by knife­edge scan method. The X­ray energy is 10 keV. The knife­edge is a gold wire with a diameter of 200 mm. The beamproles are derived from the dierential of the measurededge scan prole.

Fig. 13(Color online) Energy dependence of focused beam size
and reectivity for quad­spherical­mirror system.

Fig. 14

Scanning microscopy image of resolution test pattern.
Transmission mode. X­ray energy is 9.9 keV. Raster scan
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(Color online) Schematic diagram of optical congurationof quad­mirror system for X­ray microfocusing.

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P. Kirkpatrick and A. V. Baez: J. Opt. Soc. Am. 38, 766(1948).
2) A. Franks: Proc. Phys. Soc. B68, 1054 (1955).
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1)

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Spherical­aberration­corrected total reection
mirror optics by combination of grazing­incidence
spherical mirrors in hard X­ray region
Yoshio SUZUKI
Abstract

Japan Synchrotron Radiation Research Institute, SPring­8,
Koto 1_1_1, Sayo, Hyogo 679_5198

Grazing­incidence external­total­reection mirrors are widely used optical element in the hard x­
ray region. It was believed that highly precise aspherical mirrors are indispensable for high resolu­
tion optics, such as micro­focusing optics, because of strong spherical aberrations in grazing­inci­
dent mirror systems with spherical reectors. However, it is possible to compensate the sphericalaberrations in grazing­incidence optics by combining only the spherical mirrors. An example ofspherical­aberration­corrected quad­spherical­concave­mirror system is presented, and applica­
tions to micro­focusing and image­forming in the hard x­ray region are also described.

38  úËõ Jan. 2014 Vol.27 No.1