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úËõ Sept. 2009 Vol.22 No.5  231(C) 2009 The Japanese Society for Synchrotron Radiation Research{ñÅÍCvWFNgàÅINð}¦J­ðißÄ«½B±ÌÅåÌRÍCÊ ZP ÉæéWõÅÍWõ_ª½ X üs|Cg\¢vªuàÙÚ®¬ÉßÃ¢ÄüË X üÌõ²ãÉ

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Table 1

Fig. 2(a) Schematic gure of the experimental setup of the high­precision diractometer system. (b) Photograph of the X­
ray pulse selector, the Si(111) channel­cut monochromatorand the high­precision diractometer.

232  úËõ Sept. 2009 Vol.22 No.5

Specications of phase zone plates ZP1 and ZP2
ZP1

ZP2

Outermost zone width (nmj

250

75

Number of zones

100

400

Diameterimmj

100

120

Ta thicknessimmj

2.5

0.8

ðà ¡ ½»ÛÌ X üs|Cg\¢vª\DVD Þ¿ÌõL^»Ûð SPring­8 Å©é\

2.1.2¸§SjI[^VXe¸§SjI[^ÍC¿ñ]ivj²Coíñ]
i2uj²C¨æÑC¿Êuð²®·é½ßÌ XYZ Xe[
WÅ\¬³êÄ¢éiFig. 3jD±ÌÅCv ²ÍWõr[©çOêÈ¢æ¤Éñ]·éKvªé½ßCÎcë·Ì¬³¢i}100 nm/360
jóCÃ³²óiLm
AB_100RjðÌpµ½¸§ñ]Xe[WðVKÉì»µ½Bv ²ãÉÍC¿Êuð¸§É²®·é½ßCXe
bsO[^ì®Ì XYZ Xe[WÉÁ¦CÃdeÊZ
Tðõ¦½Êuªð\ 1 nm ÌsG]Xe[WàÝuÂ
\ÉÈÁÄ¢éBêûC2u ²Í v ²ÙÇÎcë·Éµµ¢vÍKvÈ¢ªCd¢ X ü CCD oíðÝu·é½ßCÏ×dÉDêésÌÌå^ñ]Xe[Wit[o[Fig. 3

Schematic gure of the zone plate focusing optics.3) The
phase zone plate and OSA are aligned by the XYZ position­
ing stages. These components are mounted on the sametranslation stage (stage­x), which can be moved by 60 mm
on the aligned light axis to make a sample centering using theoptical microscope. The position repeatability of the stage­x
is monitored by the linear gauge with 100 nm resolution.

model 480jðÌpµ½B
oíÆµÄÍCP»ñÜpÉ X ü CCD oíC²ñÜpÉpÈC[WOv[giIPjoíðgp·é±ÆªÂ\Åé B X ü CCD  o í Í  K N

Saturn724 ð Ì p µ ½ B ± Ì CCD  o í Í C  ´ xi108e|/sNZ/photonjCámCYi16e|/sNZjÈoíÅèC÷ãÈñÜ­xðø¦Ç­ªè·éÌÉKµÄ¢éBûaÍ72 mm~72 mm ÅC2084~2084sN
Kvªé4)BêûC»óÅÍAXyNgäÆµÄÍ10öxª¸§ÉÁHÅ«éÀEÅé½ßCñÜø¦ðdµZð¿CJ·Í 2u A[ãÉÝu³êÄ¢éXe[WÉæèC30`135 mm ÌÔÅCÓÉÝèÅ«éB

½ ZP1 ÆTu100 nm Ìr[`¬ðÚIÆµ½ ZP2 Ì 2êûCpÈ IP oíÍCJ¼a286.5 mmCpxªíÞÌÊ ZP ðì»µCÚIÉ¶Äg¢ª¯é±ÆÉð\0.01Å 2u0`75
Ì X üñÜªèªÂ\ÈJÅµ½BZP1 Í BL40XU ÅgpÅ«éGlM[ÌæSæéBxmtB»Ì200 mm~400 mm Ì IPiBAS_

Å20÷ÈãÌ¢ñÜø¦ª¾çêéæ¤CTa ][úIP_MS 2040jð

ð2.5 mm Æµ½B½¾µC±ÌêCÁHªÂ\ÈAXItCÌÇÝæèuitIÉC[WAiCyNgäÌ§ñ©çÅOü][Í250 nm ÆÈèCU[

xmtB FLA_7000jðgp·éB

2.1.3

Wõr[ÌTCYÆtbNX

100 nm ðØér[TCYÍÀ»sÂ\ÅµÄp·éBf[^ÌÇÝæèÍ

éBµ½ªÁÄCZP1 ÍtbNXðd·éÀ±Égp·éBêûCZP2 Í100 nm ðØé}CNr[ðÀ»·é½ß

Wõr[Ì`¬ÍCõwnb`Éé Kirkpatrick­ÉÅOü][ð75 nm ÉÝèµ½BZP2 ÍCTa ][BaeziKBjzu~[ÉæèC¿Êuæè8900 mm

Ìú³ª750 nm Æ¢ÌÅCGlM[ 8 keV ÌúËã¬ÉéXbgÊuÉWõµC±ÌXbgÊuð¼õÉÎµÄà12÷ÌñÜø¦µ©¾çêÈ¢Bµ½ªÁzõ¹ÆµÄpµÄ¢émFig. 2(ajnB±ÌXbgÅÄCtbNXæèàóÔªð\ðd·éÀ±Ép·r [ð® `µÈ¢ êÌ ¼zõ¹ TCYÍ C15 keVéBÅCc47 mmC¡188 mmC8 keV ÅCc35 mmC¡59 mm

Ê ZP ÍWõ X üi1 ñÜõj¾¯ðæèo·½ß

Å

Á½BÜ½C±ÌÌ¿ÊuÅÌõqtbNX§

Ì order sorting aperture (OSA) â¿Ï@pÌõw°÷xiPFõjÍC15 keV Æ 8 keV ÅC»ê¼ê7.9~106C¾iL[GX VH_Z100jÆÆàÉ 1 ²Xe[WãÉÚ4.3~105 photons/s/mm2 Å

Á½BWõr[TCYðàÁÄ¨èC¿Êu²®ÉÍõ²ã©ç¿ðÏ@·é

1000bV½ßÉXe[WªÚ®µCÊ ZP õwnÆõw°÷¾ðÊð Fig. 4 Æ Table 2 É¦·BZP1 ÅÍC15 keV ÌúËüêÖ¦édgÝÉÈÁÄ¢éiFig. 3jD±Ìõw°÷¾

õÉÎµÄCc1.4 mmC¡2.9 mmCZP2 ÅÍC8 keV ÅCÉæéiCtGbWXL@Å]¿µ½

é½ßC

c330 nmC¡470 nm ÌWõr[ª¾çêÄ¢éBWõ mm ÈàÌ¸xÅr[WõÊuÉ¿Êuð²®·ér[ÌõqtbNX§xÍC»ê¼êC3.1~109 C±ÆªÂ\Å

1.9~109 photons/s/mm2 ÅÍì®£25 mm ÅC1000{ÌÏ@ªÂ\ÅéDÜ½C±ÌXe[WÍjAQ[Wðõ¦t¯é±ÆÉæèCXe[WüêÖ¦ÌÄ»«ð100
nm Ì¸xÅmÛµÄ¢éDé½ßCWõÉæèC»ê¼

ê ZP1 ÅÍñ400{CZP2 ÅÍñ4400{Ì¾é­ÈÁÄ¢éBWõÉæér[Ì­UpÍCZP1i15 keVjÌê
C0.019
CZP2i8 keVjÌêC0.13ÅéB

úËõ Sept. 2009 Vol.22 No.5  233

Fig. 4

Knife edge scan intensity data of the (a) 15 and (b) 8 keV
microfocusing SR beams in the vertical and horizontal direc­
tion at the focal position (black line). Red and blue lines arederivatives of the measured intensity and the Gaussian tting
proles, respectively.

Fig. 5

Schematic illustration of time­resolved X­ray diraction
measurement using a laser­pump X­ray probe method.6)

Fig. 6Time chart of the pulsed laser, X­ray SR, and the gate of ofan X­ray pulse selector for a snapshot measurement withtime delay of t.

pX[U[i|võjª¿ðÆËµCÔª t oÁ½ãCúËõ X üpXiv[uõjª¿ãÉ
BµC»ÌñÜp^[ðæ¾·éB[U[ÆúËõÌ
pXÔÔu t ðÏ¦é±ÆÉæÁÄCX üñÜp^[

Table 2ÌXibvVbgÌÔÏ»ðÇ¤±ÆªÅ«éB

Achieved performances of ZP1 and ZP23j¨¿ÌCpXõð²×é½ßÉCpXªPhase zone plate

ZP1

ZP2

130 fsiFWHMjÌ[hbN`^Tt@CA[

Photon energyikeVj

15

8U[ðãN[U[ÆµÄÌpµ½B[U[VXe

1.4~2.9

0.33~0.47

ÍCÄ¶íðiµCg·800 nmCpXGlM[

1.25~1010

2.92~108

1 mJCJèÔµ 1 kHz ÌoÍª¾çêéB±Ì[U[Photon ux densityiphotons/sec/mm2j 3.1~109

1.9~109

Beam size, vertical~horizontalimmj
Photon uxiphotons/secj

Gain factor

400

4400

ÍCúËõ~ÏOÌügÁ¬ó´ÉMð^¦éRF îMÉ¯ú³êÄ¢éBúËõÌpX40_50
ps ð©µ½[U[|vÉúËõv[u@ðs¤½ßÉÍCúËõÌÔæè\ª¢¸xÅ±êçÌpXðÔ¯ú³¹éKvª

XÉ¬³Èr[ð¾é½ßÉÍCtbNXÍ¸­·éB[hbN[U[ÌêC»Ì[U[­UíÌ¤Uí·ð§ä·é±ÆÉéªC¼zõ¹ÌTCYð¬³­·é±ÆÉæèÂ\ÅæèCOMÆC ps ÈãÌ¸xÅ¯úÅ«éB[

éB{VXeÅàCZP2 ÉæéWõÅC¼zõ¹TC

U[­UíÌJèÔµÍCRF îMÌ1/6ÌügÌ

Yð10~10 mm2 É·é±ÆÉæèCc79 nmC¡87 nm

84.76 MHz ÉÝèµÄ¢éBÄ¶í©çÌoÍ^C

Ìr[TCYðÀ»µÄ¢é3)B±ÌêCtbNX~OÍC~ÏOÌüñüg200 kHz ðl¶µÄCÍ1.5~107 photons/s Å»Ì®ªÌ 1 ÉÈéæ¤È^C~OÅoÍ³¹Ä¢éB

éB±êçÌ[U[VXeÍCX üÆËºÅ

2.2

éÀ

ÉZÔ\¢vªðÂ\É·é[U[|v_úËõv[uVXe³êC[U[r[ðúËõÍC»Ì×d±qÌÁ¬@\Ì½ßÉZpX«èCúËüÀSîð½µÄÀ±nb`É±ü³êÄ¢ð à ¿ C » Ì p  X  Í SPring­8 Ì ê  C 40 _50 ps
iFWHMjÅ

éB±ÌZpX«ðpµ½sRbÔ±nb`Ì·®¡ÉÄçê½[U[êpu[XÉi[½ûüÉIñ³¹é±ÆÉæéBêûCúËõpXÌÔÔuð[U[Æ¯¶üúÉXP[Ì X üXg{Beð X üñÜÉpµ½ê·é½ßÉCX üpJjJñ]Vb^[ÅÌTO}ð Fig. 5 É¦·BúËõpXÉÔ¯úµ½Z

XZN^[ðÝuµ½BÜ½CØèo· X üÌp

234  úËõ Sept. 2009 Vol.22 No.5

épðà ¡ ½»ÛÌ X üs|Cg\¢vª\DVD Þ¿ÌõL^»Ûð SPring­8 Å©é\X­xðÒ®½ßÉCFig. 6 É¦·æ¤ÈÇ§o`d¬Ìå«ÈtBOp^[i3 mA/bunchjðpµÄ
¢éB
2.2.1

¸xxÔ§äZpúËõpXÉÔ¯úµ½ZpX[U[ª¿ðÆËµCÔª t oÁ½ãCúËõ X üpXª¿ã

Fig. 7

Photograph of precise timing delay unit. The unit is com­posed of a continuous phase shifter of 508.58 MHz RF sig­nal, frequency dividers, and digital memories to control thephase or timing delay.

Fig. 8Time­resolved (400) diraction intensity of a GaAs single
crystal at an oset angle when the surface is irradiated by the
femtosecond pulsed laser.

Fig. 921st measurements of the start time of the diraction inten­
sity change in Fig. 8 (solid circle). The start time is deter­
mined by tting the signals before and after laser irradiation
to linear functions. Red curve is a Gaussian tting of the thestart times, which shows the time precision of 19.7 ps(FWHM).

ÉBµC»ÌñÜp^[ðæ¾·éB[U[ÆúËõÌpXÔÔu t ðÏ¦é±ÆÉæÁÄCX üñÜp^[ÌXibvVbgÌÔÏ»ðÇ¤±ÆªÅ«éBêÊÉC[U[õÌxÔð§ä·éû@ÆµÄÍCÀiXe[WãÉÚ¹½~[âvYÉæÁÄõ
ÌoHðIñ³¹Ä²®·éõwx@ªéªCå«Èx ðÂ ¯æ¤ Æ· éÆ Cõ ²ª ¸ê CX ü ÆÌ óÔI[o[bvððÛÅ«È­Èé°êªéB»±ÅCäXÍC[U[ÖÌüggK[MÌxðC»ÌÊðÏ¦é±ÆÉæèCÔðÏ¦éû®ðÌpµ½BÁÉCÊð 2p ÈãÅàA±µÄÏ¦éû®ðJ­µiÁæ¾jC{vWFNgÉÄ»i»ðsÁ½5) B
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Table 3 ÉÍC}CNr[ðgp¹¸C5 Hz ÌJèÔ»µÈ¢öxÌp[Å[U[ðÆËµCÆË©çÌµÅf[^æ¾µ½ÈOÌªè7,8) Æärµ½p[^½Ëõ­xÌÏ»ðo·é±ÆÉæès¤BÜ½CÁð¦·BÜ½C{uÉÍC¿ÌÂõÌ½Ë¦ÌÔÍCAt@XªZðµÈ¢p[Å[U[ðÆËÏ»ðCICj^[Å«éuðæèt¯½BµC´qðÄzñ³¹é±ÆÅwð»»·é±ÆÉæèsíêéB±Ì»¨tÌ¨At@X¨»ÌÏ»ÌTCNðJèÔ·±ÆÉæèC«·¦Â

Table 3

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Optical parameters of the time­resolved Xray diraction
measurement system

Repetition Disk rotation Laser beam X­ray beam Number ofrepetition
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Fig. 10 Experimental setup for taking a snapshot of X­ray diraction prole of optical phase­change materials.

236  úËõ Sept. 2009 Vol.22 No.5

ðà ¡ ½»ÛÌ X üs|Cg\¢vª\DVD Þ¿ÌõL^»Ûð SPring­8 Å©é\

Fig. 11

Photograph of the rotating sample disk.6) The He_
Ne laserbeam for a reectivity monitor is guided from the back sideof the sample disk. The X­ray SR beam irradiates the sample
through a phase zone plate (ZP), order­sorting aperture(OSA), and a collimator to reduce the X­ray backgroundnoise.

Fig. 12

Photograph of the GST sample surface after the laser irradi­
ation.6) The light­colored area corresponds to the footprintsof the femtosecond laser pulse irradiation, where the reec­
tivity changed owing to the phase change from amorphousto crystal state. The disk moved in the vertical direction inthe gure.

DVD Þ¿ªèÅÌõw½Ë¦¯vªVXeð Fig. 11
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ç±üµC§¾È¿îÂi¬ÎpÂjðÊµÄC¿ÊÌ½Ë¦ðtHg_CI[hÅÏªÅ«éæ¤Éµ½B½Ë­xÍCr[Xvb^[ðÊµÄCÔªñ10 ns ÌtHg_CI[hÉÄo³êC»ÌMÍ
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Fig. 13

Time­evolution of the photoreectivity for GST.6)

mmCú³0.6 mmjÉXpb^@ÅÏ»õfBXNÌ
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Fig. 14 ÉªèáÆµÄCxÔ t ªCia) t225 ns®½ßÉCAt@XwªÀèµÄ¶ÝÅ«éÅåÌú

Æ(b) t0 ns Ì X üñÜp^[ÌXibvVbgðé300 nm Æµ½D±Ìú³ÍCÀÛÌÏ»õf

¦·BärÌ½ßC}CNr[ðgp¹¸C5 Hz ÌBXNÅÌúÆär·éÆ10{öxú­ÈÁÄ¢éBJèÔµÅÌf[^æ¾µ½ÈOÌªèÊð(c)Æ(d)³Å±Ì½ßC30 mm ÉiÁ½tFgbpX[U[r[É¦·BÏZñª¦Ä¢é±ÆÉæèC¾ç©ÉÈOÉæé»»ÉÂ¢ÄÅKððTõµ½BFig. 12 ÉñÌf[^ÆärµÄ S/N äªüãµÄ¢é±Æªª©

]¿äÉ¿fBXNðæèt¯CÅKðÅtFg

éB±êÉæèCÈOÌf[^ÅÍªèÅ«Ä¢È©Á½b[U[pXðÆËµ½ãÌ GST fBXN\ÊÌÊpÌubOs[NmFig. 14(ajnâ 2u16â26
tß^ð¦·B»»ÉÆàÈÁÄ½Ë¦­xª­Èé±ÆÉ©çêéu[hÈAt@Xs[NªvªÂ\ÉÈð½fµÄC[U[ÆËÊuª¾é¢}[NÆµÄÏ@Á½BÚ×ÈðÍÍ»ÝisÅ³êéBÜ½CÆË}[NÍ®RÆÀñÅ¨èCñ]¿ÙÆñÇ¯¶At@XÌvt@CªÏª³êCAäª¸xÉ§ä³êÄ¢é±Æªª©éBt@X©ç»ÖÔðoé±ÆÈ­Ï»µFig. 13 ÉÍCõw½Ë¦¯vªVXeÅªèµ½½

éªCt100 ns ÅÍÄ¢é±Æª¦´³êÄ¢éB»ÝC±Ì S/N äÌüãË¦ÌÔÏ»ð¦·B170 ns tßÅ}É½Ë¦ªÁµ½ªèf[^ÉæèCAt@XÌÉ»jª¶µÄ¢é±Æªª©éB±ÌªèÉæèC|v_v[ÜêÄ­éæ¤ÈC²­úÌßöÌð¾É§íµÄ¢éBúËõ Sept. 2009 Vol.22 No.5  237Ó«{¤ÍCÆ§s­@lÈwZpU»@\CíªIn¢¤iÆ CREST ¤u½»ÛÌ X üs|Cg\¢vªiÌæFcÊ`C¤ã\ÒFc¹÷jvÉæèCSPring­8 Ì BL40XU É¨¢Äsíê½D
 Ì¼iVCbÈ¨C{¤Ípi\jbNòCPxõÈw¤Z^[Ì¬´^iCÀcLL
CRËõCåòmuCài»F»w¤jCåì¶Cc

Ï²i»F»w¤jCºRüTi»FåwjC»w¤d¤ÌÁ¡êC}gåwÌçF

_³öCºÉ§§åÌ¹C

KlY³öC¬VF÷y³öCLåwÌâFO³öçÆÌ¤¯¤Å
Fig. 14

Snapshots of the diraction prole at t (a) 225 ns and(b) 0 ns, obtained by 1 kHz repetitive measurement.6)
The signal­to­noise ratio in (a) and (b) is at least several
times better than that in the snapshot at (c) t300 ns and(d) t0 ns, which were previously obtained by 5 Hz repeti­
tive measurement.7)

Ql¶£
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8)9)ªZpðg¢C¿§ä³ê½Rog_SVAmöÌ

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i~NXÆ\¢_Ci~NXÌ¯ªèðsÁ½¤
10)CàÀ{µÄ¢éBXÉC100 nm TCYÌWõ XüðpµCpXdêóÁÉæédqfoCX®ìºÌª\¢vªà¸ÍIÉißÄ¢­\èÅ238  úËõ Sept. 2009 Vol.22 No.5

éBéD

K. Inoue, T. Oka, T. Suzuki, N. Yagi, K. Takeshita, S. Goto
and T. Ishikawa: Nucl. Instrum. & Methods A, 467_468, 674(2001).
S. Kimura, Y. Moritomo, Y. Tanaka, H. Tanaka, K. Toriu­
mi, K. Kato, N. Yasuda, Y. Fukuyama, J. Kim, H. Muraya­
ma and M. Takata: AIP Conf. Proc. 879, 1238 (2007).
N. Yasuda, H. Murayama, Y. Fukuyama, J. Kim, S. Kimura,
K. Toriumi, Y. Tanaka, Y. Moritomo, Y. Kuroiwa, K. Kato,
H. Tanaka and M. Takata, J. Synchrotron Rad. 16, 352(2009).
ìGaCºF÷FúËõr[CõwZpüåæ
9 Íiú{úËõwïC2008j211.
Y. Fukuyama, N. Yasuda, J. E. Kim, H. Murayama, T. Oh­
shima, Y. Tanaka, S. Kimura, H. Kamioka, Y. Moritomo, K.
Toriumi, H. Tanaka, K. Kato, T. Ishikawa and M. Takata:Rev. Sci. Instrum. 79, 045107 (2008).
Y. Tanaka, Y. Fukuyama, N. Yasuda, J. Kim, H. Murayama,
S. Kohara, H. Osawa, T. Nakagawa, S. Kimura, K. Kato, F.
Yoshida, H. Kamioka, Y. Moritomo, T. Matsunaga, R. Koji­
ma, N. Yamada, K. Toriumi, T. Ohshima, H. Tanaka and M.
Takata: Jpn. J. Appl. Phys. 48, 03A001 (2009).
Y. Fukuyama, N. Yasuda, J. Kim, H. Murayama, Y. Tanaka,
S. Kimura, K. Kato, S. Kohara, Y. Moritomo, T. Matsunaga,
R. Kojima, N. Yamada, H. Tanaka, T. Ohshima and M.
Takata: Appl. Phys. Express 1, 045001 (2008).
ØºCc`lFú{»wï 50, 354 (2008).
ÀcLLCRËõCà ì¶CØº
CºRüTFú{»wï 51, 201 (2009).
Y. Moritomo, Y. Fukuyama, N. Yasuda, T. Nakagawa, H.
Ohsawa, J. E. Kim, Y. Tanaka, S. Kimura, H. Tanaka, K.
Kato, M. Takata, H. Kamioka, F. Nakada, W. Kasaka and S.
Ohkoshi: J. Phys. Conf. Ser. 148, 012028 (2009).

ðà ¡ ½»ÛÌ X üs|Cg\¢vª\DVD Þ¿ÌõL^»Ûð SPring­8 Å©é\ ÒÐî Øºàc@lPxõÈw¤Z^[p¤£iåÉO[v[_[e­mail: kimurasspring8.or.jp
êåªìFÞ¿]¿C¸§ X üñÜmªðn
1994N¼Ã®åwåw@Hw¤Èp¨wêUmÛöI¹Cm
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jNX¤CVRVXe¤ðoÄC2002N 9 æèPxõÈw
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 w ê U  m Û ö  Þ B 1992 N  miwjB1991N»w¤C1997N
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pi\jbN®ïÐ fW^Élb
g[NJ­Z^[ Xg[WfBASQe­mail: yamada.noborujp.panasonic.com
êåªìFõL^Þ¿CJRQiChÞ¿mªðn
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miHwjBpi\jbN®ïÐ{Ð¤ÅõL^Þ¿ÉõfBXNÌJ­É]B±ÌÔC¢EÌÀpIÏ»Þ¿ GeSbTe ðJ­µC¢EÌ4.7
GB DVD_
RAM, 2 w50 GB Blu­ray DiscÖÌpÉÀp»ð¡øB2005NæèPxõÈw¤Z^[Cqõ¤õ±B2009N 4 æè»EB

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úËõ Sept. 2009 Vol.22 No.5  239

X­ray pinpoint structural measurement fornanomaterials and devices\Watching optical recording process of DVD phasechange materials at SPring­8\
Shigeru KIMURA
Yoshihito TANAKA
Noboru YAMADA
Masaki TAKATA

Research & Utilization Division, Japan Synchrotron Radiation Research Institute,
1_1_1 Kouto, Sayo­cho, Sayo­gun, Hyogo 679_5198, JapanRIKEN Harima Institute, RIKEN SPring­8 Center,
1_1_1 Kouto, Sayo­cho, Sayo­gun, Hyogo 678_5148, Japan
Digital & Network Technology Development Center, Panasonic Corporation,
3_1_1 Yagumo­Nakamachi, Moriguchi, Osaka 570_8501, JapanRIKEN Harima Institute, RIKEN SPring­8 Center,
1_1_1 Kouto, Sayo­cho, Sayo­gun, Hyogo 678_5148, Japan

Abstract The pulse characteristic and high coherent x­ray beam of SPring­8 allow us to investigate dynam­
ics of chemical reactions and phase transition of materials caused by applied eld. In order to realize suchdirect investigation, ``x­ray pinpoint structural measurement'', which is the advanced x­ray measurement
technique in nanometer spatial scale and picosecond time scale, have developed at SPring­8. The features of``x­ray pinpoint structural measurement'' technique are, 1) spatial resolution: `100 nm, 2) time resolution:`40 ps, and 3) measurement under the photo­irradiation, electric eld and active devices. Using this tech­nique, we will explore the novel concept and new phenomena for nanomaterials and nanodevices.

240  úËõ Sept. 2009 Vol.22 No.5