GaAs-based high-frequency andhigh-speed devices
Masaaki KUZUHARA and Shinichi TANAKA

The explosive growth of new communication technologies such as the internet andmobile phones has expanded the applications of high-speed electronic devices basedon compound semiconductors. In particular,
the development of structures with superior electronic properties and advanced massproduction process technology has resulted
in high-speed GaAs-based transistors thatare making an important contribution to theimproved performance of the latest mobile
phone handsets and base stations. In this paper we describe how the technology behindsuch devices has developed so far, and outline the way in which GaAs-based high-speed
electronic devices are currently implemented.
Finally we review the prospects of cultivating
new markets for such devices in the future.
Keywords: gallium arsenide transistor,
high-power device, metal-semiconductor field-effect transistor, heterojunction field-effecttransistor, heterojunction bipolar transistor, mobile communication, microwave, millimeterwave

1. Introduction
High-speed electronic devices based oncompound semiconductors are used in anever-widening range of fields, such as amplifier devices in high-frequency radio equipment (e.g., mobile communication terminals)
and switching elements in high-speed digital
circuits. Among such devices, the best cost/
performance ratios are achieved by GaAsbased transistors, which are establishing afirm position in the market for mass-produced devices that help to meet the needs ofthe modern telecommunication society. It is
worthwhile studying how these devices havemanaged to attain such a status. There are atleast two contributing factors, which are as
follows:

The first is the inherent superiority of theelectronic properties of GaAs materials. For
the fabrication of high-speed electronic devices, these advantages include the following: 1)high electron mobility, 2) high electron drift
velocity, 3) stable Schottky barrier height atroom temperature, 4) the existence of thermally stable semi-insulating substrates, and 5)
the ability to form a variety of heterojunctions
on these materials.
Advantages 1) and 2) are the basic prerequisites for high-speed and high-frequency
operation. In particular, in the latest devices
for low-voltage mobile terminal applications,a competitive edge can often be obtained by
reducing the parasitic resistance as much as
possible. As a result, a high electron mobility
is especially important.
Advantage 3) may seem rather mundane
at first, but without a stable Schottky barrier height it would have been impossible tocontemplate the development of the modern
field-effect transistor (FET). Advantage 4)—
the existence of thermally stable semi-insulating substrates—is a property that can be taken for granted with GaAs. However, silicon (Si)substrates do not exhibit this property, andat present it is only possible to provide themwith equivalent characteristics through theuse of advanced process technologies such as
SIMOX (Separation by Implanted OXygen). In
this respect it seems that GaAs materials are
far better suited to high-frequency applications. Advantage 5)—the ability to form a variety of heterojunctions—provides designers
with a greater degree of latitude in the types
and combinations of materials that can beused to configure devices. This facilitates thedevelopment of GaAs device families tailoredto the requirements of a diverse range of
products with different functions. Heterojunctions that can typically be formed on GaAs
substrates include AlGaAs/GaAs and InGaP/
GaAs.

Photonic and Wireless Devices Research Laboratories, NEC Corporation (2-9-1 Seiran, Otsu 520-0833)
e-mail : kuzuhara@bu.jp.nec.com

4

JSAP International No.7 (January 2003)

The second factor is the solid progressthat has been made by industrial process
technology. Process technology can be broadly classified into crystal growth technology
and material processing technology. With regard to the former, it is impossible to ignore
the progress made in the use of larger wafer
sizes on GaAs single-crystal substrates. The
standard diameter of GaAs wafers is currently
changing from four to six inches. To accommodate this increased substrate size, epitaxial
growth techniques are also being developed
for processing multiple 6-inch wafers simultaneously, and it is also becoming possible tocontrol layer thicknesses to within 1 nm.
On the other hand, in material processing
technology, dry-etching techniques are being
developed with superior reproducibility anduniformity and with low damage by combining anisotropic etching with the selective
etching properties of heterojunction materials. The use of heterojunctions is important,
not only for obtaining new functions fromtheir physical properties but also because
they provide a means of improving the dimensional controllability of crystal processing.
The secret to success in the mass productionof high-performance devices is hidden in theproperties of heterojunctions.
In this paper we will describe the transitions that have so far been made in thetechnology and the current status of its
implementation, with particular reference
to mobile communication applications and
GaAs-based high-speed electronic devices.
We will also describe the latest techniquesthat are currently under development. We
will then describe the development trends indevice technology for third-generation (3G)
mobile phones—for which services werestarted in 2001—by focusing separately on
their application to mobile terminals and basestations. Finally, we will describe some otherpotential applications for this technology be-Electron Density (1018cm-3)

Over the last few years, mobile phone
terminals have evolved into pocket-sized devices weighing no more than 100 g and occupying no more than 100 cm3. This level ofminiaturization has been achieved by reducing the voltage of the battery power sources.
Until the mid-1990s, mobile phones wereoperated either at 5.8 V (five nickel-cadmium(NiCd) or nickel monohydride (NiMH) cells) or
at 4.6 V (four of these cells instead of five),but due to the wide availability of lithium ion
secondary cells and the development of power transistors capable of operating with a 3 V
supply, the use of 3 V power sources has now
become the de facto industry standard. Also,
since transistors have been developed withstructures that make them suitable for highefficiency operation, subsequent technicalreforms have made it possible to achieve substantial improvements to the talk time andstandby time.
But to produce power transistors capableof delivering output signals of the order of
one watt, the switch to low-voltage 3 V power sources means that these devices must be
operated with higher currents than before.
The Japanese domestic technical standard for
personal digital cellular communication (PDC)
requires mobile phone terminals to produce
a microwave output power of at least 1 W.
According to simple AC theory, the current
drawn by the transistor is about 1.3 A for a
3 V bias if the transistor’s internal resistance(on-resistance) is ignored. In practice, since
the presence of on-resistance further reduces
the amplifier’s power conversion efficiency,
the required current is even higher.
With the aim of achieving optimal operation with a 3 V supply, we first looked into
increasing the maximum drain current density per millimeter of gate width in the FETs.
For this purpose it is effective to increase theelectron density present in the FET channel.
However, in a conventional MES (metal–semiconductor) FET structure, increasing the concentration of impurities in the channel layer
causes a large negative shift in the thresholdvoltage and a sharp drop in the gate breakdown voltage. A large negative shift of theElectron Density (1018cm-3)

2.1 Field-effect transistors
2.1.1 Double-doped/double hetero structures

Energy (eV)

2. Application to Mobile Phone
Terminals

threshold voltage may
result in a gate bias of
0.6
4
uniformly doped(a)-3V or less, which is inVgs=0.5V
0.4
3
convenient to prepare
when operating with a
0.2
2
3 V supply. Also, evenwhen operating at 3 V,
0.0
1
a gate breakdown voltage of at least 10 V is
-0.2
0generally required for
0.6
4
stable operation, andpulse-doped(b)conventional MES strucVgs=0.5V
0.4
3tures are limited in thisrespect.
0.2
2
On the other hand,
w i t h h e t e ro j u n c t i o n
0.0
1
FETs it is possible to in-0.20crease the drain current
without causing much
100
0
20
40
60
80
change to the threshold
Distance from Surface (nm)voltage or gate breakdown voltage. The optiFig. 1: The distribution of conduction band energy and electron concentration
mal structure for meetacross double-doped/double heterojunctions. (a) Uniformly doped structure. (b)Pulse-doped structure. In the uniformly doped structure, it can be seen that elecing this requirement istrons spread out into the AlGaAs electron supply layer.
a double-doped/double
heterostructure.1,2) This
structure is characterized by having a channel
structure, and a saturation-drain voltage (kneelayer of GaAs or InGaAs sandwiched between
voltage) about 0.10–0.15 V lower. These benlayers of n-AlGaAs situated above and beefits are due to the use of an undoped Allow it. By striking a design balance between
GaAs Schottky layer at the surface, whereby 1)
the upper and lower doped layers, the gate
the injection of electrons from the gate metal
breakdown voltage and the maximum drain
to the semiconductor is suppressed, and 2)
current can be controlled independently.
the parasitic parallel conduction of electrons
Figures 1(a) and 1(b) show the conducin the AlGaAs layer (parasitic MESFET effect)tion band energy distribution and electronis suppressed.
density distribution in two types of doubleWhen an FET with a pulse-doped strucdoped/double heterostructure. In the uniture was used for power amplification (ABformly doped structure (Fig. 1(a)), a gateclass operation) at 950 MHz with a 3 V powelectrode directly contacts with an n-AlGaAser supply, it was found to have a saturated
Schottky layer doped uniformly with impuoutput power of 1.4 W, a power-added effirities (e.g., n =1.0×10 18 cm −3, thickness 34
ciency of 60%, and a linear gain of 12.7 dB.3)
nm). On the other hand, in the pulse-doped
This report was the first to demonstrate thestructure (Fig. 1(b)), there is a thin layer ofbenefits of using double-doped/double hetn-AlGaAs doped with a high concentration
erojunction FETs as power amplifier transisof n-type impurities (e.g., n=4.5×1018 cm−3,
tors that operate efficiently at low voltages.
thickness 9 nm) below an undoped AlGaAs
In 1993, analog mobile phone systems
Schottky layer (e.g., thickness 26 nm).
began to be replaced by digital systems thatare sensitive to waveform distortion. To sat2.1.2 Depletion-type heterojunction FETs
The results of evaluating the DC andisfy Japan’s domestic PDC technical standard
high-frequency characteristics of prototypes
with a 3 V power supply, it is thus necessaryof the abovementioned two types of heteroto achieve an output of 1 W in the linear opjunction FET (gate length 1.1 µm) were preerating region of the FET, as opposed to anasented in an earlier report.3)
log phones which used amplification in theWith a pulse-doped structure it was possaturated region. Also, to extend the phone’sible to obtain a gate breakdown voltage 3s talk time it is also important to improve the–4 V higher than that of a uniformly doped
power conversion efficiency (i.e., the power-

Energy (eV)sides mobile communications.

JSAP International No.7 (January 2003)

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Fig. 2: A heterojunction FET with a multilayer cap structure. (a) Cross-sectional structure. (b) Conduction band energy distribution under the ohmic electrode. The use ofa multilayer cap structure reduces the potential barrier at the n-AlGaAs layer near thesurface.

added efficiency), and to reduce the FET’sknee voltage (i.e., reduce the on resistance).
Furthermore, it should be possible to mass
produce these devices with high yield, andwith small chip dimensions.
To satisfy these requirements, the gate
length was reduced to 0.8 µm and a twostage recess embedded structure was employed for the gate electrode (see Figs. 2 and3 below).4) As a result, the drain current density was increased to 600 mA/mm (about 1.5–2 times higher than a conventional device),and the on-resistance was reduced to 2.3 Ω·mm. Selective dry etching of AlGaAs and
GaAs was used to form the two-stage recess,and the variation of recess etching depth
across the wafer was kept to a minimum byusing the former as an etching stop layer.
The large-signal characteristics of this improved FET were measured with a 950 MHz
QPSK (quadrature phase shift keying) digitally
modulated signal.4) In a miniature chip with agate width of 7 mm, a power-added efficiency of 56.3% was achieved with an output
power of 1.23 W when operated at 3.4 V.

2.1.3 Enhancement-type heterojunction
FETs
The heterojunction FETs introduced so
far have all been depletion-type devices with

6

JSAP International No.7 (January 2003)

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Fig. 3: A heterojunction FET with an Al 0.5Ga0.5As barrier layer. (a) Cross-sectional
structure. (b) Conduction band energy distribution under the gate electrode. The introduction of a barrier layer suppresses the injection of electrons from the channel
towards the gate electrode.

negative threshold voltages. A drawback ofthis type of device is that two power supplies—one positive, the other negative—are
needed to achieve amplification. Since SiMOSFETs and bipolar transistors (described
below) can operate with a single power supply, the fact that twin positive and negative
power supplies are only needed for heterojunction FETs is a distinct disadvantage. To
reduce the number of circuit components
and develop products that are more compact
and less expensive, it is desirable to develop
enhancement-type heterojunction FETs thathave a positive threshold voltage and can be
operated with a single power supply. However, enhancement-type FETs have generally
suffered from reduced maximum drain current and increased on resistance, leading to
reduced power density and efficiency.
To address the abovementioned problemsof enhancement-type FETs, a new multilayer
cap structure was introduced.5) Figure 2(a)shows the cross-sectional structure of this FET,and Fig. 2(b) shows the conduction band energy distribution below the ohmic electrodes.
In this structure, an undoped GaAs layer anda heavily-doped n-AlGaAs layer are depositedin turn below the heavily-doped n-GaAs layer
in contact with the ohmic electrodes. Sincea two-dimensional electron gas is formed in
the GaAs layers in contact with both sides of
the abovementioned heavily-doped n-AlGaAs
layer, there is a smaller potential barrier at then-AlGaAs layer that also serves as an etchingauto-stop layer. This effect makes it possible
to reduce the contact resistance along thepath from the heavily-doped n-GaAs surface
layer to the InGaAs channel layer.
Tests were performed on an experimental enhancement-type heterojunction FETwith a gate length of 0.5 µm and a multilayer
cap structure.5) When a threshold voltage of+0.20 V was selected, a large maximum draincurrent density of 390 mA/mm was achieved,
and the device also exhibited a large gate
breakdown voltage of 17 V. By employing a
multilayer cap structure, the parasitic resistance could be reduced by 0.1 Ω·mm and it
was possible to obtain an on-resistance of 1.6
Ω·mm.
For an FET with a gate width of 24 mm,
as a result of evaluating the power characteristics with a single 3.5 V power supply, an
output power of 1.0 W and a power-added
efficiency of 65.5% were achieved—enoughto satisfy the PDC technical standard. In thisdevice, it was also possible to cut off thedrain current to just 2 µA/mm just by setting

with a single 3.5 V supply: output power 460
mW, power-added efficiency 58.9%, associated gain 12.6 dB. Moreover, the gate leakage current during peak output was only 0.8 µ
A, thus verifying the effect of introducing thebarrier layer.
In a W-CDMA scheme, the transmitted
power strength of the terminal side is controlled over a wide range according to the
distance from the base station. When theamplifier is biased under class A or class B
operation, the efficiency generally becomesworse as the output power is reduced fromthe saturated output point.
A method proposed for avoiding thisproblem involves using a DC-DC voltage converter to dynamically control the drain bias
voltage V ds.7) It has been reported that thismethod allows the power-added efficiencyof the amplifier to be increased from 8% (Vds
= 3.5 V) to 21% (Vds = 1.0 V) when the output power is 20 mW. Here, it was possible
to achieve normal amplifier operation evenwhen V ds was reduced to 1.0 V because adouble-doped/double heterojunction FET has
a sufficiently low knee voltage. In practice,in a heterojunction FET with a gate width of
28 mm where the on-resistance is reduced to
1.3 Ω·mm, an output power of 1.0 W and apower-added efficiency of 59% have beenachieved with a low bias voltage of 1.0 V.8)

duced device that brings important benefits,
especially to applications such as power amplifier elements in mobile phone terminals.
Factors that have led to the growth in popularity of these devices include the fact thatthey help to make mobile terminals morecompact and light-weighted because they
can be driven by a single positive powersource, and the fact that they are suitable forcommunication applications involving digitalmodulation schemes where linear operationis required because they have comparatively
low distortion when operating with a large
output signal.
Although AlGaAs has for a long time
been used as a wide bandgap emitter material, the fact that InGaP and GaAs allow selective etching has recently resulted in a preference for the latter, which is more suitable formass production. It is also apparent that thecharacteristics of the InGaP/GaAs heterojunction interface substantially improve the reliability of HBTs.9)
There are two factors that can be said tocontribute to the improved reliability associated with introducing an InGaP/GaAs heterojunction. First, since the density of defect levels at the InGaP/GaAs interface is lower thanin the case of an AlGaAs/GaAs interface, it
has the effect of reducing the recombination
current arising from defect levels that contributes to the device lifetime. Secondly, since
the difference in bandgap energy that occurs
between the InGaP and GaAs (about 0.5 eV)
mostly appears as a discontinuity in the va-

2.2 Bipolar transistors
The heterojunction bipolar transistor(HBT) is widely recognized as a mass-pro-��������������

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the gate voltage to 0 V. Consequently, there
was no need to turn off the drain supply byproviding a separate switch circuit. In other words, use of an enhancement-type FET
makes it possible to eliminate not only thenegative power supply circuits but also thedrain bias switching circuits from the mobile
phone terminals.
In an enhancement-type FET, as the difference between the threshold voltage andthe gate forward on voltage (VF) decreases,
it becomes harder to maintain a large maximum drain current. Also, during power operation a forward gate current flows more
readily, increasing the likelihood of the amplifier operation becoming unstable. Accordingly, it becomes necessary to increase VF.
Figure 3(a) shows the cross-sectional
structure of an enhancement-type heterojunction FET developed for this purpose, andFig. 3(b) shows the conduction band energy
distribution under the gate electrode.6) Thisdiffers from a conventional structure in thatan Al 0.5Ga 0.5As barrier layer (0.5 nm thick)with a large bandgap energy is inserted between the InGaAs channel layer and the upper n-AlGaAs electron supply layer. By employing this new structure, it is possible toachieve an equivalent increase of V F while
avoiding the injection of electrons travelingfrom the channel toward the gate electrodewhen a positive gate bias is applied.
Figures 4(a) and (b) show the drain current vs. voltage characteristic and the gate
forward characteristic of an enhancementtype FET having an Al0.5Ga0.5As barrier layer(gate length 0.5 µm). The maximum draincurrent density was 370 mA/mm, and thethreshold voltage was +0.17 V. The value of
VF determined from the gate forward current
vs. voltage characteristic is 0.9 V, which represents an improvement of 0.2 V compared tothe device with no Al0.5Ga0.5As barrier layer.
For an enhancement-type FET with ahigh VF of this sort (gate width 16 mm), theinput/output power characteristics were evaluated with an input signal consisting of a 1.95
GHz digital phase-modulated signal diffused
at a chip rate of 3.86 Mcps according to a
W-CDMA (wideband code division multiple
access) scheme. By adjusting the input andoutput matching circuits to maximize efficiency while suppressing power leakage to an
adjacent channel (separated by 5 MHz) to -35
dBc or less, the following favorable results
were obtained when operating the device

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Fig. 4: (a) Drain current vs. voltage characteristics and (b) gate forward characteristics of an enhancement-type heterojunction FET with an Al0.5Ga0.5As barrier layer. The introduction of a barrier layer improves the forward on voltage
by about 0.2 V.

JSAP International No.7 (January 2003)7

lence band, it has the effect of suppressing
the recombination current that arises fromthe reverse injection of holes in the base layer
into the emitter.
It has recently been estimated that an
InGaP/GaAs HBT with a junction temperatureof 135°C has a very long lifetime of 3.6×108
hours, 10) making HBTs essential for mobile
terminal applications where high reliability isrequired.
Studies are being made of how to improve the materials used in GaAs-based
HBTs, not only to make them easier to mass
produce and more reliable, but also to enhance their performance. As in the case ofheterojunction FETs, a wider range of device
possibilities can be made available if the lattice matching constraints can be relaxed. An
example of this is the drift base HBT, whichuses a layer of InxGa1−xAs with a ramped composition (see Fig. 5). This HBT structure can
improve the current gain blocking frequency
without producing dislocations or defects,
even when a strained layer is introduced into
the device.11)

The advantages of a drift base HBT include: 1) a larger average drift velocity forelectrons in a given accelerating field dueto the ability to maintain a large conduction
band energy difference between the Γand L
valleys, and 2) the absence of Al exposed at
the surface where it can interfere with theformation of external base layer electrodes.
Adding In to the GaAs is preferable inthat it makes the bandgap in the base layer
narrower and reduces the operating threshold voltage. However, since lattice mismatch
problems may arise, there is a limit to theamount of In that can be added. Attention
has thus recently turned to GaInNAs compositions where small quantities of nitrogen areadded to the InGaAs, resulting in powerfulmaterials that can be used to make HBTs that
operate at lower voltages while maintaining lattice matching with the GaAs. Figure
6 shows the relationship between the band
positions in GaAs and GaInNAs. A problem
to be addressed with this technique is thatwhen GaInNAs and GaAs form a heterojunction, most of the difference in bandgap energy appears as an energy discontinuity on the
conduction band side.12)
The abovementioned resultshows that a GaInNAs base struc��������
ture is ideal for pnp transistors,
but is not suited for npn transisE�tors as it is because it produces
a potential barrier to electrons.
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An example has been reported in which a GaAs/GaInNAs
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ficial ramped composition layer
is formed by the superlattice,Fig. 5: Energy band diagram of a drift base HBT incorporating a layer
and the small bandgap of theof InxGa1−xAs with a ramped composition.
Ga 0.89 In 0.11 N 0.02 As 0.98 base layer(0.98 eV) is effectively linked to
the reduction of the thresholdvoltage. However, there are stillEc
problems associated with the
crystal quality and doping concentration in npn HBT base mateGaAs
GaInNAs
rials, and further remedial studies(1.43 eV)
(0.98 eV)should be carried out to achievea high current gain combinedEvwith a low base resistance.
As described above, GaAsbased HBTs are expected to open
Fig. 6: Relationship between the band positions in GaAs and GaInNAs.
up new possibilities in the future
Most of the difference in bandgap energy appears as an energy disconthrough the introduction of new
tinuity at the conduction band side.

8

JSAP International No.7 (January 2003)

materials and heterojunctions incorporatingthese materials. The ability of HBTs to operate from a single power source and their highpower densities are significant advantages
over FET devices, but there are still several
problems that need to be addressed, such as
the existence of offset voltages in the collector characteristics, achieving uniform-temperature operation across a chip, dealing withthermal runaway, and coping with surges
and load fluctuations. It will be a while yet
before these problems are fully addressed. In
the market for mobile terminal products, it isworthwhile predicting how the market shareof FETs and HBTs will change in the future,
but for HBTs it is vital to have a comprehensive debate at least including the problems
mentioned above.

3. Application to Mobile Phone
Base Stations
3.1 Current status of microwave
transistors for base station transmitters
The main purpose of a mobile phonebase station is to relay voice and data communications over radio channels while updating the positional information relating tomobile terminals that are constantly on themove. According to figures gathered in September 2001, some 65 million mobile terminal contracts have been registered in Japan,
and the number of base stations that havebeen built across the country to accommodate these users is already in excess of 33
thousand.14)
To accommodate the recent explosive
growth in the number of mobile phone terminals, the number of communication channels needs to be increased. For this purpose,a transition is under way towards third-generation (3G) mobile phone systems that use
bandwidth more efficiently. At the same time,to increase the volume of traffic that can be
carried in each base station area, increasing the output power of microwave signals
transmitted from the base station antennas isalso an important issue. In particular, in current systems where a single amplifier is used
to amplify multiple carrier waves at the sametime, it is necessary to cope with instantaneous peak outputs approximately an orderof magnitude larger than the average output
power so that the transmitter amplifier becomes never saturated. This is referred to as
operating the power amplifier with back-off,����������������������������������������������������
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3.2 Heterojunction FETs with field
plates

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Fig. 7: The year-on-year growth in the performance of high output GaAs FETs developed for mobile
phone base stations.

and allows high-quality digital radio communication to be achieved with a low bit error
rate. For these reasons, there is currently astrong need for increased output power fromthe microwave transistors used in base station transmitters.
FETs based on GaAs and Si semiconductors have been widely used in the transmission power amplifiers of mobile phonebase stations. The former have better highfrequency characteristics but have a serious
drawback with respect to high voltage operation. On the other hand, although the lattercan be successfully operated at voltages ashigh as 20–30 V, it is hard to achieve favorable high-frequency characteristics. In termsof cost, Si-based FETs are much less expensive, but 3G mobile phones—which are expected to become widespread in the future—use the 2 GHz band which is higher than
the frequency of conventional systems. Accordingly, the current status is that the betterhigh-frequency characteristics of GaAs FETsgive them the advantage in terms of overall
performance.
At the product level, let’s see how increases have so far been made to the output
power of high-power GaAs FETs. Figure 7
shows the year-on-year growth in the performance of high-power GaAs FETs developed
for mobile phone base stations. Since 1997,
when the 100 W barrier was broken for the
first time by mounting four FET chips in a single package, there has been steady growthin the output power available from such de-square of the current, this makes it harder toachieve energy savings at the base stations.
As a result, the use of higher drain currents
is no longer an ideal solution for achieving
higher output power levels.

An attempt has been made to improve
the operating voltage of GaAs FETs to 20 V or
more, which is twice the normal voltage forsuch devices.16) This involved the use of a heterojunction FET with a new structure wherea field plate (FP) connected to the gate electrode is situated on the surface passivation
film between the gate and drain.
The cross-sectional structure of this FPFET is shown in Fig. 8. The gate is formedon an n-AlGaAs surface layer, and controls
the concentration of electrons in the n-GaAschannel layer below it. The FP electrode plays
two primary roles. One is to moderate theelectric-field strength at the drain end of thegate when the gate is subjected to a large
negative bias when operating with large AC
signals. It achieves this by depleting the channel layer underneath the negatively charged
FP electrode, and as a result the gate breakdown voltage is substantially improved. The
second role is to facilitate the flow of large
AC drain currents, since the depletion layer inthe channel under the FP electrode is instantaneously reduced when the gate bias swings
in the positive direction. This has the effectof improving the linearity of the input/output
power characteristics and allowing a large
saturated output power to be obtained.
An experimental heterojunction FETwith an FP electrode (gate length 1.0 µm, FP

vices. According to the latest data, there arereports of 240 W products being available on
the market, and 300 W devices have alreadybeen produced in the laboratory.15)
Power supply voltages have remained
fixed at 10–12 V throughout this period, so
the output power levels attained so far haveall been achieved by increasing the drain current. Although this can be done by usinglarger transistor chips or greater numbers ofchips, there are a number of accompanying
problems that are exacerbated by this approach.
First, there are limits to how large thechips can be made. The package dimensions
are also limited, so it will become increasingly difficult to carry on increasing the chipsize in the future. Another problem is that increased output current
is associated with reduced input impedance.
Since matching circuits
Passivation Film
Field Platewith a large impedanceGate
conversion ratio add to
SourceDrain
the complexity, this agn-GaAs
gravates problems such
undoped GaAsn-AlGaAs
as increased reflection
n-GaAsloss and bandwidth rebuffer
duction. Finally, there is
the problem that larger
S.I. GaAs sub.
power supply circuits
generate more heat.
Since the losses in a
Fig. 8: Cross-sectional structure of a new type of heterojunction FET incorporatpower supply circuit
ing a field plate. The field plate is connected to the same potential as the gateelectrode.
rise in proportion to the

JSAP International No.7 (January 2003)9length 0.5 µm) has exhibited a peak draincurrent of 300 mA/mm and a gate breakdown voltage of 45 V. Figure 9(a) shows aphotograph of an FET chip with a multi-cellstructure designed for high power applications, and Fig. 9(b) shows a photograph ofan FET amplifier with a partial matching circuit for push-pull operation that incorporates
four of these chips. Each FET chip has a totalof 108 gate fingers in a parallel arrangement,
and the overall gate width is 86.4 mm. The
chip measures 1.5 mm × 4.4 mm.
The output power of the push-pull amplifier was evaluated at 2.1 GHz, and wasfound to increase linearly as the drain voltage increased. At a drain voltage of 22 V, thisdevice delivered an output power of 230 W
with a power-added efficiency of 42% and alinear gain of 11 dB. A W-CDMA signal was
input to this push-pull amplifier, and the leakage into a neighboring channel separated by
5 MHz was measured. As a result, the power
leakage at an output power of 40 W (8 dBback-off point) was found to be −35 dBc orless, with a 25% power-added efficiency. The
distortion characteristics at the back-off point
were improved by about 4 dB due to the increased drain voltage, and it was verified
that this device exhibits not only high output
power but also low distortion when operated

at high voltages.
Although these results were obtainedwith an experimental FP-FET with a GaAs
channel, the fabrication of an FP-FET with an
InGaP channel was also recently reported.17)
Such devices will allow base stations to operate at even higher voltages.

4. The Progress Toward New
Applications
As the internet continues to grow, thedata transfer speeds that networks are required to support are increasing rapidly. For
wireless networks, a peak transfer speed of
54 Mbit/s has been achieved in 5 GHz band
wireless systems such as HiperLAN/2 andIEEE802.11a, which are currently being standardized.18) However, cable-based systems areprogressing at an even faster rate. Accordingly, even in wireless systems it is expectedthat gigabit wireless communications will appear for applications such as real-time video
streaming and high-speed downloading.
Since August 2000, the 60 GHz band
(59–66 GHz) has been released for the operation of license-free wireless systems, and
it is strongly anticipated that this band will be
used for wireless systems operating at 100
Mbit/s and above. For example, an experimental miniature transceiver module for theTransmitter Module

ReceiverModule(a)60 GHz band has been configured by flipchip mounting a coplanar MMIC (monolithic
microwave integrated circuit) consisting of
0.15 µm gate GaAs heterojunction FETs ontoa multilayer glass ceramic substrate.19)
Figure 10 shows a photograph of thetransmitter and receiver modules. The transmitter module incorporates three types of
MMIC—a 30/60 GHz frequency multiplier, amodulator and a transmitter amplifier—andthe receiver module incorporates two types of
MMIC—a low-noise amplifier and a demodulator. This 60 GHz band transceiver module
was used to build a prototype two-way radiotransceiver conforming to IEEE 1394, and wasable to operate at 500 Mbit/s with an ASK(amplitude modulation) scheme.
Oscillators are essential components ofmillimeter-wave systems of this sort. HBTs are
suitable for oscillator applications because
these devices have a vertical configuration.
This means that they are affected little by 1/fnoise sources located at the semiconductor
surfaces, and as a result they exhibit significantly low phase noise (fluctuation of the oscillator frequency)—which is one of the mostimportant factors determining the performance of an oscillator. Figure 11 shows thesurface appearance of an experimental 38
GHz band MMIC oscillator chip which uses

MMIC

Filter
MMIC

��������������

AntennaPort(b)������������

Fig. 9: Heterojunction FETs with field plates. (a) Photograph of a chip with amulti-cell structure consisting of a heterojunction FET chip with field plates (chipdimensions: 1.5 mm × 4.4 mm). (b) Surface photograph of an amplifier with apartial matching circuit that incorporates four FET chips in the same package.

10

JSAP International No.7 (January 2003)

Fig.10: Photograph of miniature 60 GHz band transceiver modules. The transmitter module
incorporates three types of MMIC—a frequency multiplier, a modulator and a transmitter amplifier. The receiver module incorporates two types of MMIC—a low-noise amplifier and a demodulator—and a bandpass planar filter.

����������������

References��������������

���������

������������
Fig. 11: A 38 GHz MMIC oscillator. An HBT with a graded composition InGaAs base structure is usedas the active element. When detuned by 1 MHz, this oscillator has a favorable phase noise of −114dBc/Hz.

an HBT with an InGaAs graded compositionbase structure.

5. Conclusion
Although GaAs is a semiconductor material
with some favorable electronic properties, thisdoes not mean that it has outstanding qualities. Its mobility is inferior to that of InGaAs,
and its peak drift velocity is less than that of InP.
Its bandgap energy is larger than that of Si, butmuch smaller than those of SiC or GaN. However, its overall performance makes it one of
the best candidates for use in high-frequency
devices. The successful use of GaAs in power
amplifier devices for mobile phone terminals is
also due to its overall superiority over other materials rather than the overwhelming benefits ofany particular characteristic. Hopefully this paper has helped to convey this situation to someextent.
Although there is not enough space forthis article to offer many specific examples of
GaAs-based high-speed electronic devices,
there will be an abundance of new applications for such devices in the future. It has
been decided that specific frequency bands
between 20 and 40 GHz will be used forhigh-speed wireless internet access technologies to complement ADSL (Asymmetric Digital Subscriber Line) and FTTH (Fiber To TheHome). GaAs will probably play an importantrole in the wireless devices used for these applications.
As mentioned in this paper, GaAs devices
are also being used for the initial prototypesof 60 GHz band millimeter-wave wireless systems. There is no doubt that GaAs—which
has the longest history of all group III-V semiconductors—will continue to be used as thecentral material in high-speed transistors
across a wide range of frequency bands while
keeping other new semiconductor materials
at bay.

Acknowledgements
We obtained most of the research results introduced in this paper through joint
studies with Naotaka Iwata, Keiko Yamaguchi, Takeshi Nishimura, Yasunori Bito, Walter Contrata, Takehiko Kato and Gary Hau—
thank you all very much. We would also liketo thank Masaki Ogawa and Masashi Mizuta
for their helpful discussions.

Masaaki Kuzuhara (D. Eng.)
Completed a Master’s course in engineering at Kyoto University in 1981. Since joining NEC
Corporation, he has been involved in the R&D of ion implantation in compound semiconductors, Monte Carlo simulation of compound semiconductors, compound semiconductor
heterojunction devices and MMICs. From 1987 to 1988 he was a guest researcher at the
University of Illinois.

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(Accepted for publication: November 21,
2001)

Shinichi Tanaka (D. Eng.)
Completed a Master’s course in engineering at the University of Tokyo in 1986. Since joining
NEC Corporation he has been involved in the R&D of heterojunction bipolar transistors and
MMICs. From 1992 to 1993 he was a guest researcher at Purdue University.

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