Version 2.0

Microscope and Measurement Systems
for Quality Assurance and Quality Control
Capture the essentials of your component.
Quickly. Simply. Comprehensively.

The moment
smart quality samplingmakes your day.
This is the moment we work for.

// RELIABILITY    MADE BY ZEISSZEISS Puts the IQ into Industrial Quality Control
Is the right decision ever clear to see?
Yes, when it is informed by ZEISS microscope systems
for quality control and quality assurance.

ZEISS is known across the globe for high-quality, high-performance microscopes.
For superior lenses and for outstanding optical performance. The closer you look, the more
you see.
With ZEISS products in your quality laboratory, you can count on reliable results – day in,
day out. They are simple to operate, even for inexperienced users. And thanks to theirhigh degree of automation, they will reduce your operating costs with more efficient sample
throughput, Fully automated system solutions are user-independent, leaving you free
to concentrate on what you see while they generate highly precise, reproducible results.
Take advantage of the wide variety of technologies from ZEISS. Light microscopes provide
you with information on color, morphology, structure, texture and dimensions.
With X-ray microscopes, you can see inside your materials in 3D and 4D – non-destructively
and in high resolution. Electron microscopes give you additional information on composition
and the individual elements present.

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From Micro to Nano – the Most Extensive
Product Portfolio on the Market
Choose the best microscope for your application:
ZEISS systems provide you with informationin the micro to nano ranges.

Stereo microscopes

Digital microscopes

Zoom microscopes

Light microscopes

X-ray microscopes

Scanning electron
microscopes

Focused ion beamelectron microscopes

Helium ion microscopes

1 µm

1 µm

0.6 μm

0.4 µm50 nm< 2 nm

0.6 nm0.5 nmResolution

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The Tools to Master Any Task
Investigate metals, non-metals, composite materials, plastics, ceramics and­biomaterials. Quantify structures and objects. Analyze microscopic images
and document your findings.
From the moment you select your microscope, you have the advantage of ZEISS
experience – with an extensive range of methods and systems for use in production,
manufacturing and quality inspections.

Automated Imaging Systems
Microscopic analyses provide you with precise, reproducible results. The motorized­components of your microscope and automated workflows simplify the evaluation process.
Discover how manufacturing processes and wear influence textures and affect their­interaction with other components and materials. Then round out you system with a broad
range of software modules.

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Optical Inspection Systems

Optical Metrology

Produce and inspect minute components with dimensions in the micrometer range.

Which optical system you select depends on your application. For measuring complex

Your dexterity is tested constantly – for instance, when adjusting delicate gears in

3D structures, use the ZEISS O-INSPECT multi-sensor system. ZEISS O-SELECT is your tool

watch movements or components for medical technology. Inspecting solder points onof choice for 2D measurements.

boards and PCBs or examining metallic structures. Simply, quickly, visually.

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Digital Image Acquisition and Documentation

Applications

Whether your work in quality control or quality assurance, your need for simple, fast

Whether you are analyzing for cleanliness or oils, or detecting non-metallic inclusions,

imaging and documentation is growing. Axiocam digital microscope cameras from ZEISS

you will find the right system to handle your quality control and quality assurance tasks

let you handle tasks efficiently. Use ZEISS Primotech and Matscope, our iPad imaging app,from the ZEISS portfolio of light, X-ray and electron microscopes.

to digitize your entire test laboratory. Network all your microscopes and share images
from your colleagues.
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Optical Inspection Systems

See the smallest details
with the highest optical precision.

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Optical Inspection Systems

ZEISS Stemi 305
Compact design, high performance: your stereo microscope with integrated illumination and documentation

500 µmPrinted circuit board, segmentable ring light, quarter-circle illumination

Ring with labradorite, transmitted light darkfieldConfigured to your requirements

Simpler. More Intelligent. More Integrated.

Created for your applications

Stemi 305 is the compact stereo microscope with 5:1 zoom forMicroscope• Stemi 305 is equipped with integrated LED illuminators: combine• Assemble micro-optical or micro-mechanical parts to components.

­production environments. You can observe objects in high contrast

Stemi 305

vertical, oblique or lateral reflected light as well as brightfield andand three dimensions without needing to prepare samples.

Stemi 305 trino with photo tube (fixed split ratio 50 / 50)

darkfield in transmitted light.

The large working distance leaves you lots of space for assembling,

Stemi 305 cam with integrated Wi-Fi camera

repairing and inspecting your products. Take full advantage of• Even in its basic version, Stemi 305 offers you a working distanceof 110 mm and an object field of up to 29 mm.

a user-friendly microscope with integrated LED illumination andStandsa wide spectrum of camera and documentation options.

Stand K, K MAT three-LED stand (ESD-capable), K LAB, K EDU,
boom stand A, stand U with tilt arm

Capture your images with the integrated Wi-Fi camera and docu-• By using interchangeable lenses, you can reach all magnifications
from 4 x to 200 x. Double the resolution or object field size andyou can achieve working distances of up to 185 mm.
• For large objects or sample chambers, use the tilting-arm stand U.

ment them using Labscope, our iPad imaging app. Or opt for

Illumination methods

The vertical spotlight integrated in Stemi 305 delivers shadow-

the conventional photo tube to access ZEISS Axiocam cameras andBrightfield, darkfield, oblique illumination and polarization –free, homogeneous illumination.

ZEN lite imaging software.

in reflected light, transmitted light or mixed light• Choose between two documentation options: the conventional
photo tube with a 50 / 50 split ratio or the integrated Wi-Fi camera

Illuminationthat transmits your live image wirelessly to Labscope, the iPad

Spot, double spot, segmentable ring light, vertical illumination,

imaging app.

flat transmitted light base, transmitted light stand with rotating mirror

Inspect or repair them.
• Inspect PCBs for oxidation, stress corrosion cracking, incorrectlyinstalled or missing items, or inferior soldering points. In electro­
statically-protected areas (EPA), you have the benefit of standmodels with ESD functionality.
• Search for and document scratches, corrosion, wear or residues­on metallic parts. For this, you will need oblique light from­d ifferent directions and vertical reflected light to illuminate theinterior of bores or threads.
• A dental technician working with all-ceramic crowns can remove
casting beads from the structure with great precision.
• Use Stemi 305 to punch, bore and grind delicate jewelry.
Engrave the finest contours without tiring.
• A geologist in the oil exploration industry can investigate rockcores. Reconstruct the environmental conditions of earlier times
based on micro-fossil findings such as foraminifera or ostracods.

Accessories
Eyepieces and interchangeable front lenses, eyepiece reticles, fiber

12­optic cold light sources and light guide, stages, polarization equipment

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Optical Inspection Systems

ZEISS Stemi 508
Your apochromatic stereo microscope with 8:1 zoom for outstanding image contrast and color fidelity

1 mm

1 mm

Micro-fluid element, zoom: 0.8 ×

Printed circuit board, segmentable ring light, quarter-circle illumination 1.25 ×Configured to your requirements

Simpler. More Intelligent. More Integrated.

Created for your applications

Stemi 508 is the compact, reliable stereo microscope for industrial in-

Microscope• Thanks to the effective reduction in scattered light and the• Center or adjust optical sensors or fiber optic couplings.

spection. The apochromatic lens offers you razor-sharp images in 3D.

Stemi 508

precise adjustability of the zoom’s mechanics, Stemi 508 provides

Stemi 508 doc with photo tube (100 / 0 split ratio)

you with a high-contrast, razor-sharp stereoscopic image.

The lenses and mechanics are designed for heavy use. In a 36 mm• With the large 8:1 zoom, you can enjoy continuous magnification

object field, you can see all of your samples and view fine ­details

Standswith the 8:1 zoom in up to 50 x magnification. If you work

Compact stand K, LED stands K MAT, K LAB, K EDU, large stand N,

with ­particularly large objects, complement your system with inter-boom stand A, SDA dual arm stand SDA, stand U with tilt arm

changeable lenses that give you an object field of up to 122 mm.

or add ten click stops when needed. The object you are viewing isalways in focus.
• In addition to the zoom system, the interchangeable front lenses
are also corrected apochromatically. You can capture images that

With its narrow viewing angle of 35°, Stemi 508 is more ergonomic

Illumination methods

than other Greenough stereo microscopes. Even after hours of

Brightfield, darkfield, oblique illumination and polarization –work, you can still use your microscope comfortably.

in reflected light, transmitted light or mixed lightWith Stemi 508, you will observe and document your specimens inIlluminationhigh contrast and free of distortion and color fringes. Stemi 508 is

LED spots, double spots, LED ring lights with segmenting function,

your robust multi-purpose microscope for daily work in the develop-

LED transmitted light stands, fiber optic cold light sources with spot,

ment laboratory, in manufacturing and in quality control.

ring, linear, vertical, diffusion and surface illumination

are free of color-fringes over the entire accessible magnification
range from 2 x to 250 x.
• Use interchangeable lenses and extend the application range ofyour Stemi 508: view samples in the maximum object field of
122 mm and achieve a resolution of 450 Lp / mm, or use a working distance of 287 mm.
• Fiber optic cold light sources with optimized light guides provide
high brightness and contrast even with difficult objects.
• Use Stemi 508 with the photo tube for documentation.

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Accessories

With Axiocam ERc 5s, you can access your HDMI monitor directly,

Eyepieces, eyepiece reticles, interchangeable lenses, stages,

work with the ZEN imaging software at your PC or capture your­polarization equipment

images with Labscope, the ZEISS iPad imaging app.

• Evaluate printed circuit boards in true color and reap the benefitsof fiber optic cold light sources with a high color-rendering index.
• In forensic work, you can examine ammunition parts and matchshells to the weapon that fired them.
• Analyze, restore, clean and preserve works of art such as paintings and sculptures. Layer by layer you can analyze and identify­materials.
• A watchmaker can work on tiny gears, springs and drives aswell as the screws that hold watch faces, spring cores, latches
and collars in place.
• Look inside diamonds to evaluate their quality. Identify inclusions,striations and other impurities. Enjoy the benefits of brilliant­contrast and freedom from color fringes in your images.
• Work with and inspect electrodes for cardiac pacemakers.
• Analyze mixed script, the surface of coins or the roughnessof paper under laterally grazing lighting.

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Optical Inspection Systems

ZEISS SteREO Discovery.V8
Capture brilliant, high contrast, 3D images

SMD circuit board and white solder resist. Linear light for lateral highlighting,Printed circuit board, fiber optic split-ring illuminator, objective: PlanApo S 1.5 ×;

Objective: Plan S 1.0 ×; magnification: 15 ×magnification: 16 ×

Configured to your requirements

Simpler. More Intelligent. More Integrated.

Created for your applications

With its modular design, SteREO Discovery.V8 offers you superb

Microscope• VisiLED ring lights with segmenting function let you switch from• Analyze solder points, particles and artifacts on printed

flexibility. Choose between ergotubes, coaxial illumination,

SteREO Discovery.V8

a second observer bridge and intermediate drawing, photo andfluorescence tubes.

ring light to lateral oblique light at the touch of a button.
Rotate the oblique light around your object and twist the light

Illumination methods
Brightfield, darkfield, oblique light, polarization, fluorescence

Benefit from the strong 3D impression of your objects. The parfocal

for a spatial impression of the object in your live image.
• The fiber optic cold light sources CL6000 LED and CL9000 LED
provide intense cold light along with homogeneous illumination

capability of the SteREO Discovery.V8’s 8:1 zoom ensures razor-sharp

Illuminationof the object field. Thanks to the long service life of LEDs,

images over the entire magnification range. Selectable click stops

Fiber optic cold light sources with spot, ring, linear, vertical,­changing bulbs is a thing of the past. With the broad range ofallow reproducible measurement.

­d iffusion, surface and coaxial illumination; LED ring lights withlight guides and accessories, you can highlight your object­segmenting function; fiber optic and LED transmitted light units
The 450 stand is large, robust and particularly vibration-resistant.

structures clearly.
• Use different photo tubes for your own digital photo and video

Enjoy using a sample chamber that provides plenty of space forAccessories

cameras or the high-resolution Axiocam microscope cameras

working with large stages.

Eyepieces, eyepiece reticles, interchangeable lenses, stages,

from ZEISS.

­polarization equipment, binocular and trinocular tubes, stage stands
and boom stands

circuit boards.
• Capture valuable forensic evidence by analyzing ammunition
parts, tool marks, documents, fibers, coatings, glass,textiles and hair.
• Ensure the quality of medical equipment by producing
high-contrast images that show the smallest irregularities on
and beneath the surface of catheters and scalpel blades.
• Inspect the surface quality of polished coins with coaxial reflected
light and the variable highlighting of the segmentable VisiLED ringlights for darkfield applications.

• You can move your objective under the right stereo channel­using the S / doc objective slider or objective turret. This gives you
images without parallax error for vertical viewing and acquiringz-stacks.

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Digital Image Acquisition and Documentation

Document your results

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19Digital Image Acquisition and Documentation

ZEISS PrimotechYour clever imaging solution: wirelessly controlled and easy to use

200 µmBasalt, brightfield, objective: Epiplan 10 × / 0.25

100 µmExamination of a PCB after galvanizing and solder absorption, polarization, objective:
A-Plan 5 × / 0.12 POL

Configured to your requirements

Simpler. More Intelligent. More Integrated.

Created for your applications

Primotech is the smart imaging solution with an attractive price-

Microscope• With Primotech, you will get reproducible results quickly.

• Investigate samples with a thickness of up to 34 mm.

performance ratio. Control multiple microscopes wirelessly using

Primotech (reflected light and basic transmitted light)

The 5 × objective turret is coded and changes in magnification

For transparent or opaque surfaces, take advantage of the

Matscope, the imaging app from ZEISS. Experience an efficient andPrimotech D/A (reflected and transmitted light)

are automatically recorded. This saves you time while minimizing­simultaneous reflected and transmitted light.

smooth workflow, from image acquisition and analysis to report

Primotech D/A POL (reflected and transmitted light, polarization)

creation, and benefit from rapid results. A choice of stands lets you

Primotech D/POL (transmitted light, orthoscopy and conoscopy)

select the optimal microscope for a wide variety of routine tasks
and applications. Primotech combines reflected and transmitted light

Contrasting techniques

in a single stand. This flexibility offers big benefits, whether

Brightfield, oblique light, polarization (orthoscopy and conoscopy)

deploying it in the mechanical engineering, automotive and electronics industries, or using it for PCB inspection and powder analysis.

sources of error.
• With Primotech, you can take advantage of the microscope• With Primotech D / A, visualize minute depressions and holes
with the simultaneous reflected and transmitted light.

­camera integrated into the tube and its numerous interfaces.

It comes equipped with an ESD stage that prevents electrostatic

The camera is always perfectly aligned and protected fromdischarge of the stand.

­contaminants.
• Use the Matscope imaging app to network several microscopes• Primotech D / A POL is equipped with a centerable rotary­polarization stage. Use this to investigate birefringent structures

Illuminationand share images and videos via a Wi-Fi connection.

with brightfield and crossed polars in reflected or transmitted

LED 3W 5000 K (brightness equivalent to 50 W halogen illumina-

Central control via Matscope leaves you free to move aroundlight.

tion) in reflected and transmitted lightthe room.
• Matscope lets you make measurements in no time at all.

Accessories
Polarization: polarizer, analyzer, compensator, object guidance• With Primotech D POL, you can switch from orthoscopic to­conoscopic observation.

• Metadata are automatically stored and managed together withyour images.

Starter kit: leveling press with modeling clay, transport case
Digital camera tubes: option of three or five megapixels
Software20

Matscope

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Digital Image Acquisition and Documentation

ZEISS Axio Lab.A1
Your universal solution for materials analysis

Plagioclase (feldspar), twin lamination in polarization contrast

Steel structure, darkfield, objective: EC-EPIPLAN 20 × / 0.4

Courtesy of: Dr. M. Magnus, Institute for Geology and Paleontology, Freiberg Universityof Mining and Technology

Configured to your requirements

Simpler. More Intelligent. More Integrated.

Created for your applications

Axio Lab.A1 is simply unbeatable when it comes to both performance

Microscope• With five objective positions, Axio Lab.A1 has enough space• Axio Lab.A1 is the compact microscope for structural examina-

and optics. Take advantage of its excellent ergonomics, ease of use

Axio Lab.A1 (integrated reflected light illumination)

for your most important objectives. This gives you quick sample

tion: use it for determining grain size, structure, distribution andand outstanding image quality for your applications.

Axio Lab.A1 (integrated transmitted light illumination for orthoscopy)

throughput and enhances user-friendliness. When selecting

phases, and for quick on-site analyses.

Axio Lab.A1 (integrated transmitted light illumination for conoscopy)

an objective, you can choose between brightfield, bright- and­darkfield, and DIC or POL.

Axio Lab.A1 is small and flexible yet the microscope is extremely­robust so you can use it anywhere. All important controls areContrasting techniques­arranged ergonomically and easy to get to.

Reflected light: brightfield, darkfield, C-DIC, polarization
Transmitted light: (orthoscopy) linear and circular polarized light;

The polarization stand lets you capture anisotropic structures such as(conoscopy) brightfield, darkfield, phase contrast• With the 4 x reflector turret, you can switch easily between thevarious contrasting techniques.
• The C-DIC contrast technique translates tiny changes in surface
morphology into differences in brightness so that you get­excellent image results, even when working with low contrast

crystals and fibers.
Illumination
Reflected light: 12 V / 50 W HAL, optional: LED
Transmitted light: 12 V / 35 W HAL, optional: LED

samples.
• Axio Lab.A1 for conoscopy is particularly easy to operate:
the analyzer and Bertrand lens are integrated into the device and• Analyze the microstructure of metals and acquire information
on mechanisms that will lead to material defects such as fatigue,
corrosion, creep deformation, stress cracks and fractures.
• Polarization contrast lets you characterize hair, soil samples
and fibers for forensic investigations. Analyze paint chips using
brightfield, fluorescence and polarization microscopy.
• If you work as a geologist, you can examine rock section andmineral samples – for instance, in oil production.
• In environmental protection, you can identify different types ofasbestos fibers.

coupled to each other in a logical way. Swinging the Bertrand lensAccessories
XY stage, rotary polarization stage, measuring compensators,
photo tubes, ergo photo tube

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into the beam path creates a mechanically-logical couplingthat ensures the analyzer also swings into the operating position.
• Store your tools and cable in a flap on the back of Axio Lab.A1.

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Digital Image Acquisition and Documentation

ZEISS Axio Scope.A1
Your modular, multi-purpose standThin-layer solar cells, reflected light, polarization contrast, objective:

Copper sulfate crystals, transmitted light, PlasDIC, objective: A-Plan 10 × / 0.25

EC Epiplan-NEOFLUAR 50 × / 0.80

Configured to your requirements

Simpler. More Intelligent. More Integrated.

Created for your applications

The manual Axio Scope.A1 microscope is based on a modular

Microscope• Examine large samples in one piece, non-destructively:• Investigate the structures of larger components as well as the size,

concept. Adapt its system to your needs with the aid of five upper

Axio Scope.A1

sections, three lower sections and two Vario columns. Take yourchoice of transmitted light or reflected light – or use both.

you can use the spacers to vary the size of the sample space.

structures, phases and distribution of grains.

Axio Scope.A1 can handle samples up to 110 mm thick.

• Measure layer thickness and the uniform application of paints.

Contrasting techniques

Using the Vario column, even thicknesses of up to 380 mm• Evaluate surface quality and detect inclusions and dirt particles.

Reflected light: brightfield, darkfield, DIC, C-DIC, polarization,

are possible.

Axio Scope.A1 is particularly economical. Purchase only the compo-­fluorescencenents that you need now. Should your applications change

Transmitted light: brightfield, darkfield, DIC, PlasDIC, polarization,

or expand, simply upgrade the system. You can choose from among

fluorescencean extensive range of accessories.

• With 23 stage configurations and multiple interfaces, you canadapt the microscope to your requirements so that you arealways well prepared for challenges.
• The special design of the column meets even the most stringent

Illumination

stability requirements. The metal baseplate ensures low-vibration

Reflected light: 12 V / 50 W HAL, 12 V / 100 W HAL, 100 W HBO,

operation at all times.

75 W XBO, LED
Transmitted light: 12 V / 50 W HAL, 12 V / 100 W HAL, LED
Accessories
Reflector inserts, spacers, XY stage, ergotubes

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Digital Image Acquisition and Documentation

ZEISS Axio Vert.A1
Structural analyses: a matter of contrast

Aluminum alloy, brightfield, magnification: 100 ×Cast aluminum, C-DIC, magnification: 500 ×; Courtesy of: Allied High Tech Products Inc.

Configured to your requirements

Simpler. More Intelligent. More Integrated.

Created for your applications

Axio Vert.A1 is a compact, inverted microscope that affords you

Microscope• Thanks to the 5 x objective turret on the Axio Vert.A1, the right• Analyze the microstructure of etched surfaces. By recognizing

brilliant insights. Investigate large and heavy components with all

Axio Vert.A1 (coded)

the usual contrast techniques. Switch easily between brightfield,
darkfield, DIC, C-DIC, fluorescent and polarized contrast forContrasting techniques

reflected light. For transmitted light, use brightfield, polarized light

Reflected light: brightfield, darkfield, DIC, C-DIC, polarization,and phase contrast. Simply select the best technique – without ever­fluorescencecompromising. You can also combine several contrast types andTransmitted light: brightfield, polarization, phase contrast

gain additional insights. The coded 5 x objective turret automaticallymagnification is quickly accessible. The turret is coded in such agrain boundaries, you can draw conclusions on grain sizes, phases

way that Axio Vert.A1 automatically recognizes your objective.

and structural constituents. Recognize dyes and pigments• The 4x reflector turret lets you switch quickly between the various
contrasting techniques.
• With the measuring reticles, you are optimally equipped for taking

as well as impurities and structural components – graphite, forexample, becomes visible in cast iron prior to etching.
• Mechanical surface defects, cracks, pores and inclusions appear

overview measurements. ZEISS imaging software offers you awith the same clarity as fissures, scratches and cavities.

powerful range of modules that can be used to analyze grain size,

You can assess the surface quality of machined workpieces with

detects an objective change. With the help of the light manager,

Illumination

phases and layer thickness, and to make interactive measurements

precision.

you can adjust the illumination intensity. Quantify structures

50 W HAL, 100 W HAL, VisLED

for your investigations.

­efficiently and evaluate the properties and quality of your materials.

• Investigate the structure of anisotropic materials such as­magnesium, aluminum, bronze and brass. Under polarized light,

By understanding your material and optimizing the preparation

Accessories

the colors of the individual grains within the crystal latticeand production process, you will take the right measures.

Crosshairs for use in measurement, ergotubes, ergo photo tubes,

become visible.

sliding and motorized stages

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Digital Image Acquisition and Documentation

ZEISS Axiocam – Microscope Cameras
Documentation that is accurate in every detail is an important part of your daily analysis work.

Document precisely what you see. Quickly, reproducibly and with high quality images. Digital microscope cameras from ZEISS are the perfecttools for handling your images and documentation.

CCD

CCD

CCD

CCD

Axiocam MRc

Axiocam MRc5

Axiocam 503 color

Axiocam 506 color

1.4 megapixels

5 megapixels

2.8 megapixels

6 megapixels

Number of pixels (H × V)

1,388 × 1,040

2,584 × 1,936

1,936 × 1,460

2,752 × 2,208

Pixel size

6.45 μm

3.4 μm4.54 µm4.54 µm

CMOS

CMOS

CCD

CCD

Axiocam ERc 5s

Axiocam 105 color

Axiocam ICc 1

Axiocam ICc 5

Active pixels

5 megapixels

5 megapixels

1.4 megapixels

5 megapixels

Active pixels

Number of pixels (H × V)

2,560 × 1,920

2,560 × 1,920

1,388 × 1,038

2,452 × 2,056

Pixel size

2.2 μm

2.2 µm4.65 μm3.45 μm

Sensor format

1/2.5"

1/2.5"

1/2"

2/3"

Sensor format

2/3"

2/3"

2/3"

1"

Sensor diagonal lengths

7 mm

7 mm

8 mm

11 mm

Sensor diagonal lengths

11 mm

11 mm

11 mm

16 mm

Maximum frame rate at resolution

20 fps at 800 × 600

15 fps at 2,560 × 1,920

16 fps at 1,388 × 1,038

15 fps at 1,920 × 1,080

Maximum frame rate at resolution

14 fps at 1,388 × 1,040

4 fps at 1,292 × 9,68

38 fps at 1,936 × 1,460

19 fps at 2,752 × 2,208

PC interface

FireWire a

FireWire a

USB 3.0

USB 3.0

Special features

Active sensor cooling

Active sensor cooling

Active sensor cooling

Active sensor coolingfor low noisefor low noisefor low noisefor low noise

Microscope camera

Specification

Microscope camera

Specification(with ZEN Imaging Software)(with ZEN Imaging Software)

PC interface

2× USB 2.0

Special features

Network access via iPad,

USB 3.0

FireWire b

FireWire b

HDMI connection, standalone
operation, storage on SD card
Recommended for:

Recommended for:Documentation

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Particularly suitableLess suitableParticularly suitable

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Digital Image Acquisition and Documentation

ZEISS ZEN 2 core
Imaging software made easy

All functions are clearly laid out.

The archive provides you with an overview of your work.

Configured to your requirements

Simpler. More Intelligent. More Integrated.

Created for your applications

ZEN 2 core combines maximum flexibility with minimum complexity

Packages• The user interface is optimized for use in industrial production

The free version ZEN 2 starter offers (selected features):in a single software program. Optimized for your everyday applica-

ZEN 2 coretion, ZEN 2 core offers efficient and streamlined workflows thatZEN 2 starter. Free download at:yield reproducible results. When you want to get the highest techni-

www.zeiss.com/zen2startercal performance out of your microscope, ZEN 2 core gives you
the flexibility to optimize all the necessary parameters and functions.
When you create task-specific workflows, only those controls

environments.
• Short familiarization times let you train individual users quickly.

• Simple image acquisition• Manual extended depth of focus

User management lets you adapt the software to different users• Panoramic image acquisition

and their level of know-how.

• Simple image post-processing and measuring functions• With ZEN 2 core, you put the emphasis on efficient workflows so
you get quick, reliable results that are reproducible at any time.

that are necessary to the task appear on the screen. Report writing• Create job templates to ensure efficient work processes.

is a very simple process with MS Word® templates, whether they

• You can connect ZEN 2 core to other software platforms.

• MS Word® report function• Archive function
ZEN 2 core additionally offers (selected features):are predefined or created by you. You can adapt user settings• Automatic tile image acquisition and expanded depth of focus

to allow individual users access to only those specific settings that

• Creation of job templates

they need for their work.

• User management• Expanded measurement tasks• Autofocus• Integration of heating stages• Scripting language (Python programming interface).

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31Digital Image Acquisition and Documentation

ZEISS MatscopeYour access into the digital world

ZEISS Matscope imaging app

Configured to your requirements

Simpler. More Intelligent. More Integrated.

Created for your applications

Matscope, the ZEISS imaging app for iPad, has all the functions

Microscope / Camera• View the live image in real time and switch easily back and forth• Document and measure microscopic details as part of quality

you need to perform measurements. Yet it is as easy to use as a

Primotechsmartphone. With this software, you get both reliability and func-

Stemi 305 camtionality in one package.

Axiocam ERc 5s

between the microscopes in your network.
• Perform quick checks of the live image by adding a scaled gratingor crosshair raster.
• Annotate, measure and edit your images using a wide range

Matscope can be integrated into your network seamlessly, regard-

Packagesless of whether you have a Windows, Mac or Linux environment.

Matscope imaging app (basic functions); free download at:

You can share files with any computer. Download Matscope free inwww.zeiss.com/matscope

the App Store and test it using the virtual microscope.

of tools.
• Create images in high resolution with shading correction andimproved depth of field, then store the scale and other metadata
automatically.

Primotech basic functions: free functions and an additional­selection of magnifications, expanded depth of field and2D measurement• Share images and customizable reports including tables and­d iagrams via a common network folder or by email.

control or failure analysis.
• You can share results as soon as you have captured the images
and performed the measurements.
• Use the PCB measuring function to determine the minimum
thickness and maximum standard deviation of copper layers incross sections.
• Analyze the size and shape of powder particles or characterize
microscopic pores using the particle / porosity measuring function.
• Determine the average grain size of steel and other metals inaccordance with ASTM E112, ISO 643, or GB/T 6394-2002.

• Compare images side by side and store them in a variety of­formats – CZI, TIF or JPG.

Advanced Primotech functions: basic functions plus application-­
specific functions for measuring PCB layer thickness, particles /porosity and grain size, as well as for multiphase analysis
Please note: Some of these functions are only available in combination with ZEISS Primotech.

32

33

Automated Imaging Systems

Microscopic analyses give you precise,
reproducible results.

34

35

Automated Imaging Systems

ZEISS Smartzoom 5
Smart Design. Smart Workflow. Smart Output.

5 mm

500 µmInspection of a circuit board

Laser welds

Objective: 0.5 ×, LED ring illumination

Objective: 1.6 ×, expanded depth of field, LED ring illumination

Configured to your requirements

Simpler. More Intelligent. More Integrated.

Created for your applications

With its closed housing and integrated components, Smartzoom 5

Microscope• Three objectives combined with 10 × zoom mean you will always• Perform reliable and reproducible analyses on samples of theis made for industrial environments. Zoom, coaxial illumination,

Smartzoom 5: a motorized stand with coded swivel arm, motorized

microscope camera and overview camera are combined in a single

stage, optical unit (with 10 × zoom, coaxial illumination, micro-• Use the overview camera to keep track of your samples.

unit. You can set up your system in just a few minutes – no tools

scope camera and overview camera), up to three objectives with• The fully motorized system relocates your workspace away fromrequired. The workflow-oriented software was conceived to allow it­integrated ring illumination, operating unit and an all-in-one PC

the microscope to the PC, where you can control all workflows.

to operate with minimum familiarization time and rapid results.

including application software

All steps are automatically stored in the form of an inspection plan.

• The factory-calibrated components and workflow-oriented

same type.
• Inspect solder points on PCBs. Check plastic components fordefects or machined metallic parts for dimensional accuracy.
• Smartzoom 5 gives you the capability to perform difficult­inspection tasks quickly and reliably.

­software allow user-independent performance of analyses.
Contrasting techniques

Smartzoom 5 saves you valuable time. When working with struc-have the correct magnification on hand for your application.

• A transport case and tablet PC facilitate mobile use of the system.

Coaxial brightfield, segmentable ring light, ring lightturally-identical workpieces, simply create an inspection plan for
the first specimen, then it will guide your inspection of the others

Illumination

semi-automatically.

Reflected light: coaxial LED illumination, ring light, LED illumination,
mixed light

Get an overview in an object field of up to 40 mm in size andview details of your sample on the screen using the continuous,

Accessories­motorized 10 × zoom. You have the resolution to view structures

Tablet PC, transport casedown to 1 μm.

36

37

Automated Imaging Systems

ZEISS SteREO Discovery.V12 and SteREO Discovery.V20
Brilliant images in 3D

Semiconductor element, darkfield reflected light, objective: PlanApo S 1.5 ×,Semiconductor, darkfield reflected light, objective: PlanApo S 1 ×, magnification: 7.5 ×magnification: 125 ×

Configured to your requirements

Simpler. More Intelligent. More Integrated.

Created for your applications

Both SteREO Discovery.V12 and SteREO Discovery.V20 give you theMicroscope• Both SteREO Discovery.V12 and SteREO Discovery.V20 work with

• Analyze solder points, particles and artifacts on printed

benefits of motorized microscopes that suit a variety of applica-

SteREO Discovery.V12 (motorized zoom)

an electronically-generated zoom curve that lets you take precise

tions. With an extensive range of accessories, they can be optimally

SteREO Discovery.V20 (motorized zoom)

control of freely-selectable magnification positions. That gives you

equipped to meet your individual requirements. Choose between
ergotubes, a second observer bridge and intermediate photo andIllumination methods

fluorescence tubes. The large working distance leaves you plenty of

Brightfield, darkfield, oblique light, polarization, fluorescencespace for handling your samples.

circuit boards.
• Capture valuable forensic evidence by analyzing ammunition

the advantage of reproducing your image scale with an accuracy

parts, tool marks, documents, fibers, coatings, glass,of more than 99 %.

textiles and hair.

• With SteREO Discovery.V20, the large zoom range of the microscope body achieves high magnification with smaller objectives.

Illumination

Because of the narrower stereo angle, the spatial impression

SteREO Discovery.V20 comes with a 20 × zoom that gives you greater

Fiber optic cold light sources with spot, ring, linear, vertical,of the microscopic image lets you see even the smallest details

flexibility so you can switch from overviews to brilliant, high-contrast­d iffusion, surface and coaxial illumination. LED ring lights with

3D images of the smallest details.

­segmenting function, fiber optic and LED transmitted light units• Working in the pharmaceutical industry, you can test therapeutic
products and analyze their composition and quality.

much more quickly.
• Both models come with a wide range of modules and accessories
so you are always free to extend you system later as yourAccessories
Eyepieces, eyepiece reticles, interchangeable lenses, stages,­polarization equipment, binocular and trinocular tubes,
stands for stages, boom stands

needs change – right up to the most powerful imaging systemthat stereo microscopy has to offer.
• Use the SyCoP control panel to handle all the most importantfunctions of the microscope without ever looking away from theeyepiece. Quickly, precisely and reproducibly38

39

Automated Imaging Systems

ZEISS Axio Zoom.V16
High resolution and high speed: your zoom microscope for large object fields

Spark plug: inspection of functional ceramic parts; analysis of different types ofCarbon brush: extensive views of structural homogeneity; distribution of conductive­material structure such as pore formation in ceramics for insulators, conductive

phases such as Cu particles and hard phases; visualization of manufacturing effects­composite materials, and steel and copper pins

Configured to your requirements

Simpler. More Intelligent. More Integrated.

Created for your applications

Axio Zoom.V16 is the high resolution, apochromatically corrected

Microscope• Axio Zoom.V16 combines a 16 × zoom with a 0.25 numerical• Analyze the structural elements of your components such as

on-axis zoom microscope from ZEISS. With a magnification range of

Axio Zoom.V16 (manual focus)­aperture. This gives you up to 2.5 times higher resolution as com-phases, grain size, textures and excretions – also structural defects

16:1, you can zoom from a large overview (33 mm) down to

Axio Zoom.V16 (focus motor)

pared to CMO stereo microscopes in comparable fields.

such as inclusions, pores, cavities, cracks and inhomogeneities.

• The eZoom principle of your Axio Zoom.V16 combines the zoom

the smallest detail (0.7 μm).
Illumination methods

drive with an electronically-controlled iris diaphragm.

Use Axio Zoom.V16 to achieve a maximum resolution of up toTransmitted light: brightfield, darkfield, oblique light

Select your zoom mode at the touch of a button: the overview

0.3 μm in a 1.6 mm field. This is a particularly advantageous for

Reflected light: brightfield, darkfield, oblique light, fluorescence

provides maximum resolution at higher magnifications and withsmallest details without changing the objective.
• Capture the morphology and inner structure of wafers.

greater depth of field.

automated etching of large tile images. It reduces image acquisition
times and thus significantly speeds up your analysis tasks.

• Create overview images of entire components and zoom in on the

Illumination• The EpiRel contrast makes even minor differences in height visible

Cold light sources CL 1500 Eco, CL 6000 LED, CL 9000 LED CAN

in brightfield: you can illuminate your sample from a slight lateralwith fiber optic spot; ring, linear, vertical, diffusion, surface

angle, even for coaxial reflected light. This creates shadows on

and coaxial illuminators; VisiLED ring illuminators with segmenting

the sides of the structures which lend your object considerably

function, fiber optic and LED transmitted light units

more plasticity than in conventional brightfield.

Accessories
Eyepieces, eyepiece reticles, interchangeable lenses, stages,­polarization equipment, binocular and trinocular tubes,
stands for stages, boom stands

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41

Automated Imaging Systems

ZEISS Axio Imager 2Your open microscope system for automated materials analysis

Lithium-ion battery, polarization contrast

Biotite in granite; pleochroism made visible by rotating the stage; brightfield

Courtesy of: the Materials Research Institute at Aalen University

Configured to your requirements

Simpler. More Intelligent. More Integrated.

Created for your applications

Take advantage of the full flexibility of your microscope platform

Microscope• Axio Imager 2 gives you quick results and reproducible analyses.

• Examine the surface of solar cells for homogeneity andwhen performing material research and quality control tasks.

Axio Imager.A2m (manual, coded)

The light and contrast managers ensure correct automatic setting

Choose a microscope that you can adapt to your growing require-

Axio Imager.D2m (manual, partly motorized: reflector turret)of all parameters and components – even when you changements. You can apply all the usual contrast techniques for reflected

Axio Imager.M2m (motorized, transmitted light, manual)and transmitted light. With C-DIC you contrast different surface

Axio Imager.Z2m (motorized)

structures. Get precise and reproducible results: the contrast and­magnification.
• For examining the surface of reflective, low contrast specimens,
you can equip Axio Imager 2 with the fast and efficient Autofocus

light manager stores your hardware and software settings, thus

Illumination methods

ensuring you keep replicable settings and image capture conditions.

Reflected light: brightfield, darkfield, DIC, C-DIC,
polarization, fluorescence
Transmitted light: brightfield, darkfield, DIC, PlasDIC,
polarization, phase contrast

system.
• Use C-DIC to make sample structures that formerly could be seen
only in a certain direction; they are now visible in their entirety,
regardless of their orientation and without rotating the sample.
• The Shuttle & Find software module makes Axio Imager 2 thefoundation for correlative microscopy work. This enables you

Illumination
Reflected light: LED, halogen, HBO, XBO
Transmitted light: LED, halogen

to complement your light microscope structure analyses with­material analyses from your electron microscope.
• Combined with the laser scanning microscope LSM 700, you cancomplement classic light microscope contrast techniques with

Accessories

the possibilities that come with fluorescence microscopy while

6 × or 10 × reflector turret, automatic component recognition (ACR),

achieving high resolution topography.

­micro-cracks.
• Use the Autofocus system to capture particles, scratches anddefects on wafers.
• Examine hard magnetic phases and draw conclusions as to themagnetic properties of your materials using polarization contrast.
• Use the Particle Analyzer to examine the morphology and­d istribution of particles on the basis of color, brightness, shapeand orientation.
• In forensic work, you can use polarization contrast to examine
hair, dirt and fibers. Analyze paint residues using brightfield,­fluorescence and polarization.
• As a geologist searching for new deposits, you can use polarization to analyze thin sections.
• Working in environmental protection, you can identify a varietyof asbestos fibers.

contrast manager, light manager, Autofocus, manual and motorized

42stages, heating stages

43

Automated Imaging Systems

ZEISS Axio Imager Vario
Examine large specimens with automated processes – compatible with clean rooms.

TFT display; brightfield; transmitted light; red, green and blue sub-pixels

Wafers, 200 mm diameter, darkfield, reflected light in combination with Autofocus in
the clean room

Configured to your requirements

Simpler. More Intelligent. More Integrated.

Created for your applications

Examine tiny MEMS sensors, XXL wafers and everything in between.

Microscope• Take advantage of a maximum specimen size of 300 × 300 mm• Thanks to the extensive travel range, you can examine the surface

With a maximum specimen size of 300 × 300 mm and an im­pressive

Axio Imager.A2 Vario (manual, coded)

and an impressive maximum specimen thickness of 254 mm for

maximum specimen thickness of 254 mm, this is the non-destructive

Axio Imager.Z2 Vario (capable of being fully motorized)

non-destructive analysis.

way to analyze large specimens. The column design ensures stability.

Axio Imager.Z2 Vario (without turret focus)• Whether dealing with heavy specimens or working in combination
with the LSM 700 laser scanning microscope, the sturdy column

Examine wafers in your clean room: Axio Imager Vario is DIN EN ISO

Illumination methods

14644-1-certified and meets the requirements of clean room class

Reflected light: brightfield, darkfield, DIC, C-DIC, polarization,

ISO 5. With the motorized Z-axis drive and the Autofocus system,­fluorescencewith a clean room kit, meets the requirements of clean room

you can bring low contrast, reflective specimens into perfect focus.

Transmitted light: brightfield, darkfield, DIC, PlasDIC, polarization,

class ISO 5.

This produces optimum results every time.

phase contrast

design provides stability you can rely on and prevents vibration.
• Axio Imager Vario is DIN EN ISO 14644-1-certified and, togetherof solar cells for homogeneity and micro-cracks.
• Use the clean room kit and Autofocus to identify particles,
scratches and defects on wafers.
• Recognize pixel defects in TFT displays under reflected and transmitted light.
• Examine photomasks for excess chromium film and particles withthe photomask holder.

• For examining the surface of reflective, low contrast specimens,
equip Axio Imager Vario with the fast and efficient Autofocus

Illumination

system. Then even your largest specimens will remain in perfect

Reflected light: LED, halogen, HBO, XBO

focus when moved along the X- and Y-axis.

Transmitted light: LED, halogen
Accessories
Autofocus, linear sensor, manual and motorized stages

44

45

Automated Imaging Systems

ZEISS Axio ObserverYour inverted microscope system for metallography

50 µm

100 µmBrass structure

Steel, tempered structure

Objective: EC-Epiplan NEOFLUAR 20 × / 0.50, brightfieldObjective: EC-Epiplan NEOFLUAR 50 × / 0.80, bright field

Courtesy of: the Materials Research Institute at Aalen University

Courtesy of: the Materials Research Institute at Aalen University

Configured to your requirements

Simpler. More Intelligent. More Integrated.

Created for your applications

Axio Observer, the inverse material microscope from ZEISS, provides

Microscope• Automated components give you reproducible results.

• Investigate the structure and determine grain size, distribution andalmost unlimited sample space. That means you will save all that

Axio Observer 3 materials (coded)

The contrast and light managers automatically control your micro-

time and needless effort on extensive sample preparation – a big

Axio Observer 5 materials (coded, partly motorized)

scope settings.

advantage.

Axio Observer 7 materials (motorized)• Take advantage of the numerous analysis options for investigating
structures, grain boundaries and phases.

You will get a flexible platform, perfectly adapted to the require-

Contrasting techniquesments of your work in metallography. Use all the contrast methods

Reflected light: brightfield, darkfield, DIC, C-DIC, polarization,

to produce brilliant images of your structures.

­fluorescence

Axio Observer is future-proof: simply adapt the microscope to meet

• Choose between three different types of stand – from manual to
fully motorized.
• Navigate and control your Axio Observer in comfort by using

Transmitted light: brightfield, DIC, PlasDIC, polarization,either the operating buttons on the stand or the touch screen,phase contrast

or via the software.

phases with the aid of optional software modules.
• Examine steel for purity and identify non-metallic inclusions on thebasis of color, contrast, shape and orientation.
• Measure the layer thickness and geometric properties of electrodes.
• Using polarized light, analyze anisotropic structures suchas Barker-etched aluminum alloys, zinc alloys, graphite,titanium alloys.

your changing requirements.
Illumination
Reflected light: halogen, HBO, LED, XBO
Transmitted light: halogen, LED
Accessories
6 × reflector turret, automatic component recognition (ACR),­contrast manager and light manager for automatic microscope­settings

46

47

Automated Imaging Systems

ZEISS EVO MA and EVO HD
The scanning electron microscope for your most demanding samples

100 µmWith EVO you can capture and analyze images better than ever

20 µm

Carbide, depicted at 1 kV with the EVO HD SE detector

The C2D detector in variable pressure mode shows the structure of self-healing c­ oncrete

Configured to your requirements

Simpler. More Intelligent. More Integrated.

Created for your applications

Resolution• The robust stand and variety of chamber sizes allow you to work

• Analyze the thickness, composition and structure of automobile

before. Use the HD detector technology to capture high con-

1.9 nm, 2 nm, 3 nm at 30 kV SE with HD, LaB6, W

trast surface details of fractures, composites, machined surfaces

4.0 nm at 30 kV BSD (in VP mode)and ­particles. With EVO 25, you can view large samples from the

5 nm, 10 nm, 3 nm at 3 kV SE with HD, W­aerospace and automotive industries in its large 420 mm chamber.

8 nm, 15 nm, 20 nm at 1 kV SE with HD, LaB6, W• The user-friendly image navigation and selection of sample types

EVO increases your productivity in quality control and failure

Magnification• Its high stability and its geometry ensure precise element analyses­analysis. Put Automated Intelligent Imaging to work on your< 7 – 1,000,000 × / < 5 – 1,000,000 ×with large, heavy or complex samples.
• EasyVP lets you switch seamlessly between high vacuum and­variable pressure modes.
let you capture images quickly.
in high vacuum and variable pressure modes.
• Your system is future-proof and can be expanded at any time.

tasks and it will quickly deliver reproducible results. What’s more,­SmartBrowse has interactive image templates, letting you display

X-ray parameters

Simply equip it with new detectors or with an extended pressure

your sample images in context and significantly speeding up the

8.5 mm WD / 35° TOA

or wet mode when your application requirements so demand.

paints.
• Ensure the cleanliness of your production processes.
• Conduct analyses on the composition of non-metallic inclusions
in steel.
• Conduct forensic investigations on gunshot residue and firing pin
indentations on cartridge cases.
• Perform quick and reproducible particle analyses.
• Analyze the distribution of pharmaceutical agents on tablet­sections.
• View slip bands, cavities and fractures caused by pore formation
in metals and alloys.

creation of reports.
Pressure range
10 – 400 Pa

48

49

Automated Imaging Systems

ZEISS SigmaYour field emission SEMs for imaging and analysis

Alloy and tungsten core, surrounded by a steel matrix; Inlens Duo, BSE mode, low voltage

The SE detector shows damage to the non-conductive micro-objective of a CCD.

Configured to your requirements

Simpler. More Intelligent. More Integrated.

Created for your applications

The Sigma product family combines field emission and scanning

Resolution• The automated workflow leads you step by step, increasing your• Analyze materials and manufactured components to acquire

electron microscope technology (FE-SEM). Its most salient feature is

0.8 nm at 30 kV (STEM)

its excellent performance in imaging and analysis. With Sigma,

0.8 nm at 15 kV

you will increase productivity by using functions such as the

1.6 nm at 1 kV

­integrated airlock, first-rate EDS geometry and an intuitive workflow

2.0 nm at 30 kV (in VP mode)• The integrated airlock lets you achieve high sample throughput

Acceleration voltage• Combined electrostatic and magnetic fields optimize opticalwhen working with beam-sensitive samples.
for wafers up to 5” in size.

in only four steps.
Sigma offers you detector technology for imaging with high resolu-

productivity.
• Sigma offers you first-rate analysis performance, particularly

0.02 – 30 kV­performance while reducing field effects on the sample at thesame time.

tion. The microscope is designed to handle different operating­conditions and can be adapted to suit your application precisely.

Sample current

Sigma produces high quality, sharp, high contrast images – from

4 pA – 20 nA (100 nA optional)

nano particles and nano fibers to semiconductors and MEMS com-

• The Inlens Duo detector for SE and BSE signals lets you acquire­topographic information in high resolution on damaged microstructures and MEMS parts.
• Create a 3D surface metrology of precision-machined components
in real time to determine the cause of fractures and defects.
• Use an extensive range of detectors to create high resolution­images and analyses of nano materials.
• Analyze coatings and thin films to reveal hidden surface detailsof non-conductive particles.
• Handle large metal samples in the chamber with the Cartesian

information on topography and composition in a single detector.

motorized stage and use for in situ plasma cleaning to main-• Gemini beam booster technology allows small beam diameter andtain high image quality and get crystallographic and channelingponents, and all the way on to solar cells. It gives you information

Magnificationhigh signal-to-noise ratio even under extremely low acceleration

on topography, composition, crystallography and element distribu-

10 – 1,000,000 ×

voltages.

­contrasts.
• Sigma’s large airlock lets you change wafers quickly on semi­
conductor and electronic samples. Capture topographic images

tion for use in comprehensive sample characterization.
Electron emitterof element layers in high magnification.

Schottky field emitter
Standard detector

50

Inlens SE, ETSE detector, VPSE-G4 (in VP mode)51

Optical Metrology

Use optical metrology forcontact-free quality control.

52

53

Optical Metrology

ZEISS O-INSPECT
Your multi-sensor measuring instrument for 3D measurements

With O-INSPECT multi-sensor measuring instruments from ZEISS, you can makeAnd the star key makes key changing a thing of the past

­optimum measurements of each property – optically or physically.

Configured to your requirements

Simpler. More Intelligent. More Integrated.

Created for your applications

O-INSPECT measuring instruments combine optical and physicalMeasuring instruments• O-INSPECT measuring instruments are equipped for use in• O-INSPECT is the ideal solution for inspection tasks in the fields

measurement technology in one device. You can cover a broad

O-INSPECT 322­near-factory conditions: you will get reliable measurement resultsof the medical technology, plastics, electronics and precision

range of particles and extensive evaluation options.

O-INSPECT 543

over a wide range of temperatures.

mechanics.

Choose between sizes 322, 543 and 863, and enjoy the benefits

O-INSPECT 863• You can use the optical sensor to measure objects quickly andcontact-free.

of optical and physical sensing technology in proven ZEISS quality.

• O-INSPECT lets you switch from optical to physical measurement

These devices are equipped with the VAST XXT scanning sensor

Featuresand provide you with genuine 3D measurements.

Discovery telecentric zoom objective, adaptive illumination ­system,within the same measuring process. Even if you switch manu-

VAST XXT scanning probe, probe turret, reference sample for

ally, the probe settings are recognized automatically. No need for­measuring ranges up to 800 × 600 × 300 mm­time-consuming recalibration.
• With its adaptive illumination system, O-INSPECT gives you precise

Accessories

optical measurement results. The two LED colors and the array

Loading system with glass palette and mesh palette, referenceof illumination angles can be optimally adapted to suit the­palette, white-light distance sensor, rotating stage

measuring element. Capture perforations and contours using• With the white-light distance sensor, you can inspect both­reflective and transparent objects such as glass and strongly­absorbent matte surfaces.
• Solve complex inspection tasks precisely, flexibly and with a highdegree of automation.
• Determine the geometry of workpieces point by point acrosstheir surface and access parameters such as dimension, distance,
angle, shape deviation and spatial relationship.

transmitted light.
SoftwareCALYPSO• Use the O-INSPECT optional white-light distance sensor to­measure 3D structures efficiently and contact-free.
• Scanning technology lets you not only inspect individual points,
but also predict shapes accurately.

54

55

Optical Metrology

ZEISS O-SELECT
The digital measuring projector for 2D measurement

Once you have clicked on the elements, the software offers you a range of inspection

Results are superimposed directly at the dimensioning arrows on the image.

characteristics for selection in the image.

Color coding immediately indicates that values are within tolerance.

Configured to your requirements

Simpler. More Intelligent. More Integrated.

Created for your applications

The O-SELECT measurement system works automatically and thinks

Measuring instrument• Achieve sharp edges automatically: O-SELECT corrects blur at the• O-SELECT works simply and reliably in a wide variety of fields,

collaboratively – both in creating measurement programs and car-

O-SELECT

edges even when it’s not directly visible.
• With Autofocus, you can rely on the measurement system torying out the measurement itself. It only takes the touch of a button:
simply place the workpiece on the measurement field and start the

Features­select the right distance between camera and sample, bringing

program. Within seconds, the lenses capture contours, automatically• Camera for high resolution digital images

the workpiece edge into focus and maximizing contrast.

evaluate all inspection characteristics and then record them in the• Autofocus for sharp images of samples at different heights

ZEISS PiWeb evaluation and statistics software. This means that the• Telecentric ZEISS lenses for index-free images

optical 2D measurement of workpieces is traceable, reproducible• Ring light with individually-controllable segments for measuring

and therefore reliable.

tasks with reflected light• Transmitted light for measuring contours and perforations• O-SELECT automatically calculates the right illumination for every
workpiece: you always work under optimal light intensity.
• With automatic workpiece recognition, you can select the­elements you need with just a few clicks. These are then converted
into a measurement program.
• It also recognizes the elements being measured, independently

56

Accessories

identifying elements such as circles or lines on an unknown work-

Coaxial light for measuring deep structures

piece.

from the automotive and electronics industries to plastics­processing.
• Check the dimensional accuracy of distances, radii or angles
on standard sample types such as stamped and bent parts,
injection-molded workpieces or laser-cut workpieces.
It’s quick and reliable.
• Perform measurements in a field of view approximately
100 × 90 mm in size.
• O-SELECT software was specially developed to meet your­requirements for digital measurement projectors.
• Both hardware and software are coordinated to optimize themeasurement process

57Specifications
Find the microscope system that best suits your application.

SteREO
SampleStemi 305

Stemi 508

SteREO

Axio

Axio

Axio

Discovery.V8 Primotech

Vert.A1

Lab.A1

Scope.A1

Discovery.
Smartzoom 5 V12/V20

Axio
Axio
Zoom.V16

Use of unprepared

Sample

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Large samples

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High sample throughput

High sample throughput

Analyze sample

Analyze sample

composition

composition

2D measurement

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ResolutionLive 3D impression

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3D imageParticularly suitable

2D measurement

Resolution

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Live 3D impression

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ShuttleEVO

SIGMA& FindParticle
NMI

AnalyzerCAPA

O-INSPECT O-SELECT

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Image acquisition

Image acquisition andLess suitable

Observerfunctionality

functionality

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Axio

Vario

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Creation of reports

ImagerImager 2

Use of unpreparedsamplesdocumentation

Axio

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Less suitableParticularly suitable*) Maximum permissible error (MPE)58

59

Applications

Find the right systemfor your quality control needs

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61Applications

Technical cleanliness

Metallic, non-metallic particles and fibers on filter membrane microscope:Classification of particles according to elemental composition with the ZEISS SmartPI

Oil purity

Steel purity

Membrane with residual soil particles from fresh oil

Non-metallic inclusions in steel

ZEISS Axio Imager.Z2m

Microscope: ZEISS Axio Imager.Z2m

Microscope: ZEISS Axio Imager.Z2m

Objective: EC Epiplan-NEOFLUAR 10 × / 0.25

Objective: EC Epiplan-NEOFLUAR 10 × / 0.25

Objective: EC Epiplan-NEOFLUAR 10 × / 0.25

Camera: ZEISS Axiocam MRc

Camera: ZEISS Axiocam MRc5

Camera: ZEISS Axiocam MRc

Technical cleanliness is an essential aspect of quality assurance inMake sure your products meet quality requirements by ­monitoring

Nearly 80 % of all machine downtime occurs in connection with

Metallurgical purity is essential to the quality as well as to thethe automotive industry. The degree of particulate contamina-

the technical cleanliness in your production process. With ZEISS

oil contamination. That’s why analysis is so critical in the oil andprocessing and use characteristics of steel products. Non-metallic

tion has far-reaching effects on the functionality and service life

SmartPI for a­ utomated analysis of nano particles, you can analyze­lubrication industry as well as the automotive and aerospace indus-­inclusions are often the incubation points for fatigue cracking.

of your products. The quantitative and qualitative detection of

up to 200,000 particles on your filter with the electron microscopetries, power supply and many other branches of industry. Using oil

For this reason, the quantity, size and distribution of non-metallic

particle contamination improves your manufacturing process andand produce results on the chemical composition of the particles

analysis, you can determine the degree of contamination caused

inclusions have a significant effect on the strength and corrosion

saves you money. Work precisely and efficiently with the ZEISS

examined. With the correlative particle analysis function, you will be

by wear and corrosion of integral components such as housings,

resistance of your steels and steel products over time. Use ZEISS

system solutions for standard and advanced analyses combinedusing both light and electron microscopy measure and analyze up to

pumps and valves. Minimize your maintenance costs and maximize

systems for analyzing non-metallic inclusions within manufacturingwith particle thickness measurement. With SteREO Discovery.V8,

200 particles – quickly and effectively. In combination with electron

availability.

and receiving, or when investigating instances of damage.

you can identify particles down to 25 μm in size. Use the Axio

dispersive spectroscopy (EDS), correlative particle analysis provides

Zoom.V16 fully ­motorized zoom microscope to analyze particles

you with comprehensive material characterization and specificallyZEISS systems are the ideal solution for quantifying particulate

Axio Imager 2 and Axio Observer are the optimal choice for deter-

as small as 5 μm. ZEISS systems for technical cleanliness conform

supports you in identifying potential killer particles.

­contamination. Use the Axio Imager 2 to measure particles downmining steel purity. ZEISS systems support EN 10247, ASTM E45,

to 2 μm. ZEISS systems for oil analysis comply with ISO 4406,

ISO 4968, DIN 50602 and other international standards.

to ISO 16232 and VDA 19 as well as internal company standards.

ISO 4407, SAE AS 4059, DIN 51455 and internal company standards.

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Applications

ZEISS Particle Analyzer
Investigate minute particles on a large scale

Gallery view, AxioVision Particle Analyzer

Classification view, AxioVision Particle Analyzer

Configured to your requirements

Simpler. More Intelligent. More Integrated.

Created for your applications

The ZEISS Particle Analyzer is made for practical use, performing

Microscope• From the contrasting processes and your choice of objective to• Inspecting for component cleanliness: determine the residual dirt

everyday industrial quality control tasks. Use it to investigate the sizeStandard analysis:

the exposure time of the camera and the illumination settings:

content of your components automatically in terms of quantity,

distribution of residual dirt particles and classify them as metallic• SteREO Discovery.V8

your motorized light microscope systems make sure that all ofsize, distribution and particle type (metallic and non-metallic asor non-metallic particles or fibers. The ZEISS solution complies with

Advanced analysis:

your settings have been correctly selected. Together with the fully

well as fibers). You can evaluate samples in accordance with

ISO 16232 and VDA 19.

• Axio Imager 2

automatic image analysis provided by AxioVision, you will get

ISO 16232 and VDA 19 as well as internal company standards.

• Axio Zoom.V16
SteREO Discovery.V8 is the system of choice for your standard analy-

reproducible results at all times – safely and reliably.

• Specify the particulate content of fresh and used oil as well as• Use the gallery view for a quick overview of both shiny metallic­lubricants in terms of quantity, size and distribution – it’s auto­

ses in accordance with VDA 19. You can perform advanced analyses

Softwareand non-metallic particles and fibers. This allows you to relocate

matic. You can evaluate samples in accordance with ISO 4406,

starting at 5 μm with Axio Zoom.V16. With Axio Imager 2, you areLight microscope:

particles of interest quickly.

ISO 4407, SAE AS 4059 and DIN 51455 as well as internal

optimally equipped to measure particle heights as part of advanced• Particle Analyzer Projects

analysis.

• AxioVision MosaiX

you measure, classify and document the size distribution, particle• AxioVision Autofocus

type and chemical composition of residual dirt particles.

Correlative microscopy:• The combination of light and electron microscopes with EDS lets

­company standards.
• Working in the chemical industry you can detect objects andstructures fully automatically in terms of quantity, size, color andmorphology.

• Correlative Particle Analyzer (CAPA)
Accessories
Filter holder
Correlative filter holder

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65Applications

ZEISS NMI
Analyze non-metallic inclusions automatically. In compliance with standards.

The images provided by MosaiX enable the full depiction of large inclusions.

Sulfide inclusions in steel

Courtesy of: SKF GmbH, Schweinfurt

Configured to your requirements

Simpler. More Intelligent. More Integrated.

Created for your applications

Non-metallic inclusions affect the mechanical properties of steel.

Microscope•	Get precise, reproducible results. Axio Imager.Z2m and• Perform qualitative and quantitative analyses of the microstructure

Knowing the structure and identification of inclusions provides you

Axio Imager.Z2m

Axio Observer.Z1m stands are motorized: automatic im-with important information for product development and quality

Axio Observer 7 materials

age ­analysis and storable parameter settings ensure precise­reproducibility.

assurance.
Softwareon the basis of size, shape, orientation and color.

• Evaluate your samples on the basis of all relevant standards in• Evaluate inclusions based on the images in a comparative diagram.
• Identify sulfide, oxide and nitride non-metallic inclusions precisely

The European standard EN 10247 on automatic and manual specifi-

AxioVision NMI, MosaiX, Autofocus­parallel: AxioVision NMI supports DIN 50602, EN 10247,

cation of microscopic purity replaces various national standards.

Optional: comparative diagrams, grain-size analysis, multi-phase

ASTM E45, ISO 4967, GB / T 10561 and JIS G 0555 standards.

By setting parameters clearly, you can carry out precise and user-

analysis, cast iron analysis

and in compliance with standards.

• Get quick, precise information on your samples. The NMI system
adapts to your daily workflow. With just a few clicks, you can

independent evaluations of non-metallic inclusions.
Camerasbegin the analysis, create your report and archive your test results.

Together with international experts on steel purity, ZEISS has devel-

Axiocam MRc

NMI software lets you view your parameters at a glance. Stan-

oped a fully automated image analysis system. NMI gives you results

Axiocam MRm

dard-specific techniques are clearly displayed. The gallery gives
you a quick overview of various types of inclusion: sulfide, oxidethat are reproducible at any time.

66

of steel to determine its purity.
• Investigate the content and distribution of non-metallic inclusions

Accessories

and globular inclusions. Relocate interesting inclusions at the click

Sample holderof the mouse.

67Applications

ZEISS Shuttle & Find
Bring together the best of light and electron microscopy in one package

50 µm

Image of an ADI sample from a light microscope

BSE image of the same sample area;

Magnification: 400:1

the microstructure is clearly visible.

Configured to your requirements

Simpler. More Intelligent. More Integrated.

Created for your applications

Combine the optical contrasting techniques of a light microscope

Microscopes• Use Shuttle & Find to link interesting sample areas in both light• Analyzing for residual dirt in the automotive industry. First classify

with the analytical methods of an electron microscope. You’ll get

Light microscopes: Axio Scope.A1, Axio Zoom.V16,

and electronic microscope systems. It stores sample areas marked

metallic and non-metallic particles in the light microscope.

additional information on both the structure and function of yourAxio Imager.M2m, Axio Imager.Z2m, Axio Observer.Z1,

in the light microscope together with their coordinates so you canThen perform a comprehensive examination and identification ofsamples.

SteREO Discovery

then find these areas in the electron microscope – in just seconds.

particles in the electron microscope.

Electron microscopes: EVO, Sigma, Crossbeam, GeminiSEM• Get more information from your sample. Use the numerous opti-• Use the light microscope to determine the purity of steel and­productive workflow between your light microscope and electron

Softwarecal contrast techniques in the light microscope for information

identify sulfides, oxides and silicates on the basis of shape andmicroscope.

AxioVision

on size, morphology and color. The electron microscope expands

color. With the electron microscope, you can then characterize

Shuttle & Find software module

your knowledge with details of its structure and chemical materi-atypical inclusions based on their chemical composition with the

SmartSEM

als composition. All that with resolution down to the nanometeraid of X-ray spectroscopy.

The Shuttle & Find software module enables an easy-to-use,

Use your light microscope to capture and mark points of interest on

range.

the sample. Then, use Shuttle & Find and its special sample holder
to locate the points again in your electron microscope. Now you

Accessories

can depict your sample at several times the resolution and continue

Sample holders for correlative microscopy

examining it in further detail. And it’s all absolutely reproducible.

Adapter plate
Calibration marker• Take advantage of this precise, quick and reliable workflow to• With fully automated image analysis, you can be confident of­reliable, reproducible results.

boost your productivity in nano-fabrication. Working with both
microscope systems in a highly automated and effective manner,
you will reduce cycle times and significantly increase throughput.

Optional adapter frame

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69

Applications

ZEISS Correlative Cleanliness Analysis
Combine light and electron microscopy to characterize and classify particles.

100 µmLight microscopy image of a metallic particle

Electron microscopy image of the same particle

Configured to your requirements

Simpler. More Intelligent. More Integrated.

Created for your applications

Acquire more information in less time with correlative particle analy-

Microscope• Characterize process-critical particles and identify killer particles.

• Cleanliness analysis ensures the proper function and verifies thesis (CAPA). By combining light and electron microscopy you unleash

Light microscopes: Axio Zoom.V16, Axio Imager.Z2m

First capture particles with your light microscope, then find them

the full performance of both systems.

Electron microscopes: EVO, Sigma, MERLIN, GeminiSEM

again with your electron microscope and EDS analysis to get

Analyze particles using your motorized light microscope: Axio Zoom.

SoftwareV16 and Axio Imager.Z2m provide information on the quantity, size

AxioVision

distribution, morphology and color of particles. With polarization

Software module: ZEISS Correlative Particle Analyzer (CAPA)

contrast, you can differentiate between metallic and non-metallic

and MosaiXof all particle types: reflective, non-reflective and fibrous.

particles.

SmartSEM

See all classifications and ISO codes at a glance.

­information on their material composition.

SmartPI
Then identify critical particles and relocate them in your electron• CAPA automatically supplies you with a report that integrates
your results from both light and electron microscopic analyses.
• The gallery and evaluation view provide a quick overview

cleanliness of parts.
• Analyze particles in oils and brake fluids from 2 μm in size to­prevent the fouling of filters, nozzles and valves – as well as oil
aging, cracks, leaks or pump failure.
• Use EDS analysis and automatically determine the chemical composition of up to 200 of the largest particles or up to 200 particles
in a selected size range.

• Select and relocate interesting particles with the touch of a button.
• Your results are available up to ten times faster that when per-microscope. The material composition of the particles is automati-

Accessories

cally determined by means of energy dispersive X-ray spectroscopy

Sample holder for 47 mm or 50 mm particle filters(EDS). The results of both light and electron microscope analyses will

Adapter plate

be consolidated in a single report.

Calibration marker

forming light and electron microscope analyses back to back.

Optional adapter frame

70

71Applications

ZEISS ParticleSCAN VP
The robust SEM with a SmartPI user interface

A selection of 2D particle sections captured with the BSE detector

Choose between a selection of sample holders or use your own.

Configured to your requirements

Simpler. More Intelligent. More Integrated.

Created for your applications

ParticleSCAN VP offers a completely integrated solution for indus-• A selection of sample holders for pins and filters• Capitalize on greater flexibility with rapid system deployment at

The ParticleSCAN VP system is based on an SEM platform alreadytrial applications that you can use wherever you need it to increase• Up to four EDS detectors

productivity and quality. The integrated SmartPI technology makes• Detector for backscattered electrons• Reap the benefits of automatic self-calibration.

everywhere: carry out projects for process optimization, then moveparticle analysis automatic.

• Internal chamber: 267 × 193 × 300 mm• With reproducible results, you are free to concentrate on inter-on to the next site to work on projects there. This provides you with

• Power supply: 208 – 230 V, 50 / 60 Hz (single phase)
Designed for field use, ParticleSCAN VP is very user-friendly; this• Integrated PC

means that deploying the microscope in industrial environments• Dust filter systemposes no hazards to the equipment. The scanning electron micro-• Robust transport case and cover

scope system offers variable pressure and a tungsten source.

• Lifting recesses for forklift trucks

The robust housing makes it easy to pack up and transport the sys-

• Dimensions in operation: 770 × 770 × 1,720 mm

tem, and put it into operation on-site in just a few hours.

• Dimensions in transport: 770 × 770 × 1,740 mm• Weight: 475 kg *different locations.

preting information – not just acquiring data.
• The robust portable housing has proven itself across the globe inproven many times for on-site use. It gives you access to critical data

quicker access to critical data from those responsible for project
management. The range of sample holders suits most sample types

applications for the military as well as in the mining, and oil andcustomarily used in industry, including filters. Or use your own

gas drilling industries.

holder and configure it quickly with the aid of the user-friendly• Integrated SmartPI technology is standard, offering you auto­

interface for routine tasks.

mated particle analyses whenever they are needed.
• Take advantage of up to four EDS detectors for quick chemical
analysis.
• Measure particles on pin samples or use the optional filter holders.

* Approximate weight: the exact weight depends
on the configuration.

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73

Applications

ZEISS SmartPIYour SEM software for particle analysis

Completely automated, simple workflow for localization, imaging and identification ofIntegrated, automatic particle analysis for industrial applications such as cleanlinessparticles

technology

Configured to your requirements

Simpler. More Intelligent. More Integrated.

Created for your applications

Smart Particle Investigator (SmartPI) is a software package designed• Sample holders for particles on pins, filters and embedding resins• SmartPI offers you all the features of SEM control, image process-

Automate routine tasks and leave yourself free to concentrate on

for particle analysis in the field of cleanliness technology.

• Simple workflow and user-friendly interface

ing and EDS analysis for analyzing and characterizing particles.

important things like examination, characterization and reporting.

SmartPI transforms conventional and FE-SEM microscopes from• Automated system calibration on start-up and at intervals duringZEISS into powerful tools for the automatic characterization of­particles of interest in a single application.

measurement• Measure several samples in a row with without monitoring theprocess.

• The system allows you to automate repetitive analyses.

You can set up fully automatic analyses quickly. Since you are freed• Reap the benefits of continuous, unmonitored operation.

up from the manual task of data acquisition, you can use to the time

• Get objective results, thanks to minimal operator input.

you save to gather important information from your data and make• Perform analyses such as particle counting, determination of size

well-informed decisions.

and particle identification.

Use this software for routine analyses – it lets you perform stan-

SmartPI is designed particularly for technical cleanliness. It can auto-

dard tasks and calibration automatically and without user input.
­Advanced users have the benefit of a variety of measurement

SmartPI performs these tasks automatically:

matically create reports in accordance with ISO 16232 / VDA 19 andparameters and classification types. Reporting options allow access• Localization of particles in every field of viewin line with user specifications. Or use it in the dynamic evaluation

to more information than ever before.

• Advanced image analysis for characterizing morphologyof results.

With SmartPI, you get more out of your SEM: data acquisition is• EDS analyses for identifying particle composition

In correlative particle analysis (CAPA), you can increase theaccelerated and processes can run overnight and on weekends with• Correlation of all data for grouping the particles according to­productivity and depth of information in your work by using SmartPI(size and shape)

no need for monitoring.

type using a classification databasecorrelative workflows between light and electron microscopes.

• Storage of particle images and data in a database for use in­studies and reports• Provision of various tools for data acquisition and creating reports

7475

Service and Support
for Your ZEISS Microscope System
ZEISS Moments are about passion. The same passionthat drives us to support and accompany you andyour ZEISS microscope over its life cycle ensures thatyour work will lead systematically to success.

You work hard. We make sure your microscope keeps pace with you.
High imaging quality, reliable results and instrument availability are the parameters ofyour day-to-day working life. Your ZEISS microscope integrates seamlessly into this­demanding workflow. It provides you with insights and results that you can trust:­thorough, comprehensive and reproducible. With our Life Cycle Management we help
you keep your microscope in optimum condition to get these optimum results.
Life Cycle Management comes with your microscope.
Life Cycle Management from ZEISS backs up our solutions throughout the working life ofyour ZEISS microscope system. From the procurement phase onward, you can count on our
support with site surveys to optimize the location for your microscope system. Throughout
the operational phase we will complement our service with support for relocations andupgrade opportunities that enhance or expand your possibilities. As soon as you think about
replacing your long-serving microscope with a new one, we will take care of the disassemblyand disposal of systems that are no longer needed. Rely on our service features: our employees analyze the status of your system and solve problems via remote maintenance or directly
at your location.
From expert to expert
Never hesitate to ask our application specialists to support your specific tasks. Take advantage of our training sessions for any colleagues or employees who will be working with yourZEISS microscope.
Peace of mind and availability with regular maintenanceYour service plan is tailor-made for you. Make sure you take advantage of all the­opportunities your ZEISS microscope system offers. Get optimized performance, instrument
reliability and availability, all at predictable costs. Choose from different service levels of
our Protect-Service Plans, ranging from Protect preventive, via Protect ­advanced, to Protect
premium. We look forward to discussing your ideal Service Plan personally.

77

The moment you see something thathas been hidden from you until now.
This is the moment we work for.

How will doctors treat their patients in the future? How far can we go with the miniaturization of semiconductor structures? What role will photographs and videos play in the way wecommunicate in years to come? These and many other questions are what drive us every day
at ZEISS. Only those who ask will find the answers.
As pioneers in the industry and one of today’s worldwide leaders in the field of optics andoptoelectronics, we have always pushed the limits of the imagination at ZEISS.
The questions for medicine in the future are already being worked on by our people – withboldness, passion and innovation. From this impetus will come medical instruments that optimize the success of treatments and laboratory devices that will underpin medical advances.
The many challenges that industry faces also motivate us to continue setting new standards
in technology. As we do, quality in all components is being safeguarded by ZEISS. Just as it
will be in the smaller, higher-performance and low-priced microchip of the future.
ZEISS researchers and developers are working with equal determination to realize their­quality standards for moving and fixed images. Whether in the largest planetarium in theworld or in the smallest smartphone that has ever been built, it’s going to happen and you
will see it. This passion for topmost performance links all business areas at ZEISS. That’s how
we create advantages for our customers and inspire the world to look for things that havebeen hidden until now.

// INNOVATION    MADE BY ZEISS

79

Carl Zeiss Microscopy GmbH07745 Jena, Germany
microscopy@zeiss.com
www.zeiss.com/manufacturing
EN_42_010_001 | CZ 06-2017 | Subject to design changes and changes to contents included in delivery, as well as technological advancements. | © Carl Zeiss Microscopy GmbHNot for therapeutic, treatment or medical diagnostic evidence. Not all products are available in every country. Contact your local ZEISS representative for more information.