PT5E-02111

RIKEN PHOTOELECTRON
SPECTROMETER
ＡＣ－２
INSTRUCTION MANUALCONTENTS
1. Product outline
1-1. Preface
1-2. Purpose of use
1-3. Definition of DANGER / WARNING / CAUTION / NOTE
1-4. Method of confirmation for CE marking type………………………2………………………2………………………3………………………4

2. Important notice for safety
2-1. Warning cases
2-2. Caution item………………………5………………………8

3. Function of products
3-1. External drawing
3-2. Name of each part and function
3-3. Block diagram………………………9………………………11………………………13

4. Before operation
4-1. Handling at mounting
4-2. Cable connection
4-3. Piping
4-4. Optical fiber connection………………………15………………………15………………………16………………………17

5. Operation method5-1. Check items
5-2. Power input
5-3. Power ON
5-4. Measurement………………………19………………………19………………………19………………………20

6. Maintenance check
6-1. Daily check
6-2. Consumable parts………………………21………………………23

7. Trouble case measures
7-1. Self-diagnosis at trouble
7-2. Measures at trouble
7-3. Before trouble to be considered

8. How to stop operation
9. For relocation
10. Definition of words
11. Measurement principle
11-1. Measurement principle of photoelectron
11-2. Measurement of photoelectric work function………………………24………………………24………………………25………………………27………………………28………………………29………………………30………………………31

12. List of Product Specifications
12-1. Product specifications
12-2. List of configuration………………………32………………………34

1

1. Product outline
1-1. Preface
Thank you for purchasing our Photoelectron Spectrometer AC-2. Please check the model
number against the model number in the instruction manual.
This instruction manual describes the correct methods required to operate the instrument.
Please read this manual carefully even if you have experience in handling this instrument.
This manual should then be store in a place where operators can be reached easily whenrequired for reference.
Following additional detailed manuals are available regarding operation of this instrument
for you to refer.
Name of manualContents
AC-2 Instruction manual for WINDOWS
Measuring method of Work Function and(Measuring method for Work Function or Ionization potential using this product.
Ionizing Potential)
AC-2 Instruction manual for WINDOWS
Measuring method of thickness using this(Measuring method for thickness andproducts.
Counting rate)
AC-2 Service Manual
Consumable parts replacement method.
Operate according to the following Operation Method 1-2.
When operating or performing maintenance, be sure to follow the instruction manual. Do
not modify or repair the instrument using tools other than those specified in thespecification. Otherwise, the safety warranty of the product will not be guaranteed. We
shall not be held responsible for accidents or damage caused when the product ishandled in a way other than described in the instruction manual.
It is strictly prohibited to copy or transcribe a part or whole of this manual.
Specifications are subject to change without notice.

1-2. Purpose of use
This is designed to measure the photoelectron emission in air of solid state sample undernormal temperature and normal pressure. The sample is measured in a clean room orlaboratory for fine instrument where least contact of contamination to the surface of thesample is likely to occur.

2

・The measurement of threshold energy of photoelectron emission generated toradiate ultraviolet rays.（In most cases, this threshold energy is interpreted as work
function and ionization potential.）・The measurement of thickness on oxide film for thickness of a few to an around few
hundred Å.

1-3. Definition of DANGER / WARNING / CAUTION /NOTEDANGERDANGER indicates an imminently hazardous situation which, if not avoid, will result indeath or serious injury. This signal word is to be limited to the most extreme situation.

WARNINGWARNING indicates a potentially hazardous situation which, if not avoided, could
result in death or serious injury.

CAUTIONCAUTION indicates a potentially hazardous situation which, if not avoided, may resultin minor or moderate inquiry. It may also be used to alert against unsafe practices.

＊NOTE
This mark means the advice at the handling.

31-4. Method of confirmation for CE marking type
The CE marking is labeled on the detector in case of comply with CE marking. Pleaseconfirm the instrument specification before using. Please refer Declaration of Conformitythat is at the end of this manual if you have CE marking type.
You can confirm instrument specification to see the CE marking as follows.

1-4-1.LC1

CE marking

CE marking label(LC1 unit)

1-4-2.DC1

CE marking

CE marking label(DC1 unit)42. Important notice for safety
2-1. Warning cases

WARNING
Do not open the main unit cover with power on.
・There is the high voltage part inside, you may receive the electric shock.
・As the ultraviolet rays are radiated from the lit-on lamp, do not see it by nakedeyes absolutely. This may cause the inflammation of skin.
・As the lamp lit on or just after light-on is heated up, do not touch it by hand.
It may cause a burn.
Abnormal heat, fume, abnormal sound and nasty smell
If any abnormality should take place during operation, stop operation immediately, switch
off the power and remove cable from the power socket. If continue to use, it may cause
the electric shock and fire.
Shock such as dropping
Do not do the action to give shock or drop.
As this is composed of fine electronics parts, it may become far from normal operationand measurement.
・Operation at place with high temperature, humidity and plenty of dust.
・Do not store or operate at high temperature, humidity and plenty of dust. It may
cause trouble action, electric shock and fire. The operation shall be made at the given
range of temperature and humidity.
・ When desired to move from low temperature place to high temperature place, thereis the case of dew inside or on the surface. The operation in such may cause thetrouble. When move the product, leave it for some hours alone at the operation place
and let it used to the ambient temperature.

When use the deteriorated parts
・ Check the pipeline regularly and replace the appropriate parts regularly. Whencontinue to use the deteriorated parts, it may cause breakage of pipe and exploded
accident.
・ The lamp which passes away life excessively may cause explosion.

5

WARNING
・OPERATION POWER
Do not use other power voltage than the described. It may cause the breakage of
product, electric shock and fire.
・Connection of earth terminal(grounding)
For safety, connect the power cable to electric outlet with earth (3P).When use theaccessory transducer plug, ground the earth terminal. If not grounded, it may cause theelectric shock.
・Handling of power cable・Do not put things on the power cable, pull in, push out, bend or slice. As power cable isdamaged, it may cause electric shock and fire.
・When plug in and out the power cable into electric outlet, be sure to do it with powerplug grasped. When pull the cable, a part may be disconnected and cause the fire.
・Check that there is no dust on the power plug and plug into electric outlet fully. Then do
not use the loose electric outlet which may cause the contact failure. It may cause fire.
・When plug in the power cable, do not touch it by wet hand. It may cause the electric
shock.
・Do not make power tapping hub.
Do not connect many cables into the same electric outlet. This may cause the fire and it
may affect other product by power shutoff of breaker due to over use of power. This issubject to commercial power electric noise and may easily cause the trouble.
・Intrusion of foreign substanceDo not put other material than the measuring goods from the sample door. Then, add themetal material or flammable material inside from the windows. When use as it is, it may
cause the faulty action, electric shock and fire.
・Put thing on the product
Do not put small metal goods such as pin, clip and container with water such as vane,
plant. When they put inside and operate it as it is, it may cause the damage of products,
the electric shock and fire.
・When install or move the unit
The unit is big, heavy and precision instrument. So, the vibration may influence on theunit. When install or move, don’t give the vibration to the unit. And don’t fall it.
When install or move, we recommend that you contact and ask us to install or move.

6

WARNING
・Do not stare the tip of the optical fiber.
During measurement, ultraviolet rays are emitted from the tip of the optical fiber.
Please do not stare absolutely.
This can cause visual impairment and eye pain.
・Do not stare the output port of the spectrometer.
During measurement, ultraviolet rays are emitted from the output port of thespectrometer. Please do not stare absolutely.
This can cause visual impairment and eye pain.
・Please do not connect to the OUTLET of the LC1, other than DC1.
Please do not connect to the INLET of DC1, other than the LC1.
It may cause the damage of products, the electric shock and fire.

・If it is used with methods other than we have specified, the protective functions
provided by this unit may be deteriorated.

WARNING
Caution, electricity
This label is attached on or inside of the unit to indicate that hazardous voltages may exist.

Caution, high temperatureThis label is attached on or inside of the unit to indicate that the surface may be with hazardous hightemperature.

Caution, ultraviolet
This label is attached on or inside of the unit to indicate that looking straight may cause vision
disorder.

General warningThis label indicates that improper handling may cause serious damage on health or assets.

7

2-2. Caution item

CAUTION・ Contact to the end surface of metal
When required to contact the end surface such as iron plate, enough attention
and care should be taken so that any damage cannot take place.
・ The use of Walky-talky near the product
When use the walky-talky etc which emits electric wave near the cable orproduct, there is the case that the correct measurement cannot be carried out
and the attention for it would be required. When use such walky-talky etc, use
it where there is no influence.
・ Procedure of power on
Make power on after Operating System (OS) for Personal Computer is set up.
If the power gets on before Operating System is set put, it may cause theerror of operation.
・ Power on again
When make power on gain, do it in 5 minutes again after power off. Whenmake power on within 5 minutes, there is the case that the normal operation
cannot be carried out.
・Operation at the unstable place
Do not put it at the unstable place such as slant and vibrating place. It may not do thenormal operation.

・ The caution for compressed air
When the following material is contained in the compressed air, it may deteriorate thedetector and dry air generating conditioner and there is the possibility for damage.

Kind
Materials which should not contain
Solvent Acetone, Benzene, Phenol, Toluene, Trichloroethylene, Xylene,
Cresol, Thinner, Aniline, Chloroform, Alcohol, Dioxane,
Tetrahydrofuran, Methylene chloride, Cyclohexanone, Carbon
tetrachloride etc
Acid
Sulfuric acid, Nitric acid, Hydrochloric acid, Acetic acid, Acetic acidetc
Gas
Chlorine, Sulfurous acid, Hydrogen sulfide, Bromine,
Semiconductor gas etc
Oil
Hydraulic fluid (Phosphatic Ester), Fuel oil, Water Soluble Cutting
Fluid (Alkaline), Kerosene etc
・ When use at more than given pressure, it may damage dry air generating
system.
・ When induct liquid such as water from the compressed air pipe, it may
damage the system.
・ When induct other gas such as N2 gas, oxygen, inert gas than air fromcompressed air pipe, it may damage the system.
・ When a PC is connected, use it according to operating environment
conditions of the product.
8

3. Function of products
3-1. External drawing①POWER/STANDBY LAMP

3-1-1. LC1②TROUBLE LAMP

③POWER SW.

⑩OPTICAL FIBER CONNECTOR⑪LAMP MAINTENANCE DOOR

④BREAKER⑤FUSE⑥POWER IN⑧RS-232C(For PC)⑦POWER OUT (For DC1)

⑨Optical cable connector （for DC1）9

3-1-2. DC1①POWER／STANDBY②TROUBLE LAMP
③OPEN LAMP

④SAMPLE
DOOR⑤SAMPLE⑦HEIGHT⑥SAMPLE CLIPGAUGE

⑧HEIGHT HANDLE⑮DETECTOR
MAINTENANCE DOOR
⑨FUSE
⑭OPTICAL FIBER⑬DRAIN OUTCONNECTOR⑫AIR IN⑩POWER IN⑪Optical cable connector（for LC1）

⑰DEW POINT⑯PRESSURE GAUGECHECKR⑱MIST SEPARATOR⑯PRESSURE⑲DRAIN COCKGAUGE

⑬DRAIN OUT⑳MICRO MISTSEPARATOR
103-2. Name of each part and function
3-2-1．LC1
・Front panel① POWER／STANDBY LAMP：Measurement time・・・・・・・・ Light on of green lamp
Waiting (Warming up)・・・・・・ Blinking of green lamp
② TROUBLE LAMP
：Power on initial／Trouble time・ Red lamp blinking(Light off at measuring condition)③ POWER SW.

：ON(｜)、OFF(O)・Rear side panel④ BREAKER⑤ FUSE・・・2.5A T×2 pcs⑥ POWER IN⑦ POWER OUT(for DC1)
⑧ RS232C(for PC)⑨ Optical cable connector(for DC1)・Right side panel⑩ OPTICAL FIBER CONNECTOR・UPSIDE PANEL⑪ LAMP MAINTENANCE DOOR

3－2－2．DC1
・FRONT PANEL① POWER／STANDBY LAMP：Measurement time・・・・・・・・ Light on of green color
Waiting(Warming up)・・・・・・・Blinking of green color② TROUBLE LAMP
：Power on initial／Trouble time・Red lamp blinking(Light off at measuring condition)③ OPEN LAMP

：Orange lamp blinks when SAMPLE DOOR is open.

④ SAMPLE DOOR
⑤ SAMPLE CLIP
⑦ HEIGHT GAUGE⑧ HEIGHT HANDLE：This not only fixes sample but makes sample at earth.
：This gives height control standard of measuring surface.
：This changes the height of measuring surface.

11

・Rear side panel⑨ FUSE・・・2.5A T×2 pcs⑩ POWER IN⑪ Optical cable connector(For LC1)
⑫ AIR IN
⑬ DRAIN OUT・Left side panel⑭ OPTICAL FIBER CONNECTOR
・Upside panel⑮DETECTOR MAINTENANCE DOOR
・Right side panel⑯ PRESSURE GAUGE⑰ DEW POINT CHECKR⑱ MIST SEPARATOR⑲ DRAIN COCK
⑳ MICRO MIST SEPARATOR

12

3-3. Block diagram
3-3-1. Electric line
Dry
AC-2
LC1 (Light Source Part)
Diaphragm

Lens

power
sourceMesh filter

Lamp

Spectrometer

Counter
Controller

Detectorｅ
Optical fiber
SampleStage

DC1 (Measuring Part)Z stage

X stage driver

PhotodiodLight Adjuster

SampleX stage

ControllerｅDisplay/Controller
Personal computer

LCD display

Printer

13：Electron：Ultraviolet rays
：Pipe
：Electric signal line

3-3-2. Pipe line drawing

PRESSURE GAUGE
0.5～0.6MPa

AIR IN

Press：0.5～0.6MPa
Flow：Over 5.5NL/min
Pipe：6×4mm

RegulatorMIST
SEPARATORMICRO MISTSEPARATOR

2 portsolenoid valve

Membrane air dryer

DRAIN OUTPRESSURE GAUGE
0.1～0.25MPa

Detector

Regulator

Mass flow controller

Measure time 0.25 liter/min
Purge 2.0 liter/min

14

4. Before operation
4-1. Handling at mounting①When transport, be sure to carry it with over 2 persons by supporting the bottom parts.
②Mount this product on the stand with a load capacity of 100kg or more.
③Use this products inside of the room such as laboratory etc under stable temperatureand humidity. Especially, the installation to the following place shall be requested to
avoid. It may cause the trouble and accident.
・Place outside of room and with water drops
・Place full of dust and humidity
・Place full of vibration
・Drastic change place of temp and humidity. Sun-drought and ventilation wind.
・Place full of solvent、acid、alkaline vapors, much chemical floating.
④ As this is composed of fine electronics parts, do not drop or throw and mount it instable and horizontal place.
⑤ Keep noise source from large capacity of transducer, motor, motive power and highvoltage generator.
⑥ When use the walky-talky or hand-phone, put it at over 1m away from it to prevent of
the operation by electric wave barrier.

CAUTION・Install the unit away from surroundings by 20 cm or more.
・To remove the power plug immediately after an abnormality occurs, separate therear side from the surroundings by 20 cm or more.

4-2. Cable connection
Connect with the following procedure.
① Connect LC1 with DC1 by accessory power cable.
② Connect LC1 with DC1 by accessory optical cable.
③ Connect LC1 with personal computer by accessory RS cable（9pin）.
④ Connect power cable to LC1.

CAUTION
・The cable connection shall be performed by our service engineer. Request
service engineer for cable connection.
・Don’t detach the cap from the optical cable connector for LC-1/DC-1.

15

4-3. Piping① As piping material, use the following nylon or polyurethane tube.
AIR IN side：Ex diaφ6mm、Inner diaφ4mm、Press resi. over 0.6MPa.
DRAIN OUT side：Ex diaφ8mm、Innerφ5mm、Press resi. over 0.3MPa.
②Check that the tube is cut vertically, the cross section is circle and there is no damage.
③Check that the tube plugs into depth surely and cannot be pulled out after mounting.
④Connect instrumentation air or compressed air(Pressure：0.5～0.6MPa) to AIR IN side.
⑤Be sure to connect the pipe to DRAIN OUT side.

CAUTION
Water is produced from DRAIN OUT. Exhaust to the outside so that thespherical instrument cannot be wet. At this time, to prevent advertent flow, it isarranged that water can run down.

164-4. Optical fiber connection

CAUTION
The optical fiber connection shall be performed by our service engineer. Request
service engineer for optical fiber connection.

Guide pin

Fiber top

Attachment to DC1

Guide hole
Attachment to LC1
Optical Fiber

Guide crack
Guide pinLC1 optical fiber connector

DC1 optical fiber connector

17Installation of optical fiber
1) Remove the cover of optical fiber at AC-2DC1 unit.
2) Insert the optical fiber into the Optical fiber connector of AC-2DC1 unit.
Install the screw cap. At this time, guide pin must fit to the groove of guide.

Screw cap

Cover3) Remove the cover of optical fiber at AC-2LC1 unit.
4) Insert the optical fiber into Optical fiber connector of AC-2LC1 unit, and fix it by fitting
guide pin and guide groove with screw cap.

Screw cap
Cover

18

5. Operation method5-1. Check item
・Wiring：Check that the main unit and personal computer etc are connected correctly.
・Piping：Check that the given items(Pipe material or pressure etc) has no error or not.
Optical fiber

Display/Controller

LC1(See INSTRUCTION manual

DC1
Power cablefor PC, printer etc)
RS-232C

Optical cable
Power cable (100-240V IN)

DRAIN OUT

AIR IN

Wiring, piping drawing(0.5～0.6MPa)

5-2. Power input
If power switch is given on electric outlet, make it on. Then, after understanding below,
make power on.
・Check that breaker on the rear side panel(LC1) is off.
・Check that the power voltage on electric outlet corresponds to that of product.
The power cable of LC1 and that of personal computer(including display、printer)areconnected to the electric outlet with earth.

WARNING
Earth (ground) terminal connection
・ For safety, connect the power cable to electric outlet. (3P)・ When use the accessory transducer plug, ground to earth terminal.
・ If not grounded, there is the possibility of electric shock.

5-3. Power ON
Make power on with the following procedure.
①②③④

Turn power on for personal computer.
Check that Windows PC is set up.
Make ON the breaker on rear side of product (LC1).
Make POWER SW.”ON” of the surface of LC1 panel.

CAUTIONAs this system may cause function error, do not make the following action
absolutely.
・ Make power on before Windows PC is set up.
・ Connect AC-2 for Windows before trouble lamp flicker is put out.
19

5-4. Measurement
The measurement is carried out by use of AC-2 for Windows. For this detail, see AC-2
for Windows INSTRUCTION MANUAL『How to measure the Work Function or Ionization
Potential』,『How to measure the Thickness and Counting rate』.
Now, for correct measurement, the following attention shall be made.
① Avoid the sample contamination as possible as can be. For handling, use thetweezers. Take care not to give your breathing breath to the sample.（To avoid theadsorption by water vapors in breathing.）② As the dust is much smaller than measuring scope area, this does not affect themeasuring value in most cases. If you worry about it, remove it by tweezers or blow it
out by air.
③ Over 90% ultraviolet rays to be radiated is given in the square scope with one 1 mmstroke in the center of sample stage. Then, this is measuring scope. When over 2 kindof material are co-existing on the surface of measuring scope, the photoelectron isdischarged from them. Then, slight ultraviolet rays are radiated in the spherical line ofmeasuring scope.
④ Adjust the height of SAMPLE STAGE. It is available to adjust at within ±0.2mm by
HEIGHT GAUGE. The radiation light beam comes in from optical fiber at angle of
30°.Then, if the height is deviated by 0.2 mm, the deviation of the radiation position
shall be 0.3 mm.
⑤ The configuration of sample is rectangle with thickness at10mm,one stroke at 20mm
～ 50mm or powder material. For other material, it cannot be fixed at the sample
stage and tends fall down from the sample stage during operation.
⑥ When measure the same size sample or below as measuring scope, the attention isrequired. For example, when measure the photoelectron from ITO which waspatterning in square with one stroke at 4 mm on aluminum plate with one stroke at
20mm, approx 10% ultraviolet rays shall be radiated onto aluminum though theposition and height are adjusted precisely. As aluminum discharges over 50 times’
photoelectron of ITO, this result shows photoelectron emission from aluminum. In
such case, it is recommended to measure by masking with tape which is difficult todischarge photoelectron.
⑦ The counting rate of photoelectron should be measured at the range of below
2000cps. From the relation of correction, the accuracy of counting rate at over2000cps will be worse. The counting rate of photoelectron should be controlled by UVIntensity.

CAUTION・ During the measurement, you do not open the sample door intentionally.
・ Please close immediately if the sample door is opened during the measurement.
20

6. Maintenance check
It is required to make the regular maintenance check to maintain the function andreliability of products.

6-1. Daily check
6-1-1. Display lamp check
Check that POWER／STANDBY、TROUBLE and OPEN LAMP light on correctly.
・POWER／STANDBY LAMP
：Measurement time・・・・・Green light on
Warming up ・・・・ Green light flicker
・TROUBLE LAMP
：Normal time・・・・・・・ Light off
Trouble time・・・・・・Red light flicker(Just after power on)・・Red light flicker
・OPEN LAMP
：When SAMPLE DOOR opens, Orange light flickers.

6-1-2. Check inside of sample room
Before power one, open SAMPLE DOOR and check that there is no dirt inside. If any
dirt is found, remove it with the following method.
①Inhale the contamination by the vacuum cleaner.
②Wipe off contaminants attached to the stage with isopropyl alcohol.
③When use the liquid such as solvent to remove contamination, open sample door
and leave it for a few hours and use it after the volatile vapors go out from thesample room.

CAUTION・When measure with electrified powder or volatile solvent left in the sample
room, it may give damage to the detector and shorten the life.
・Wipe off contaminants attached to the stage with isopropyl alcohol.
・Isopropyl alcohol is a combustible liquid; therefore, it may catch fire. Handle itwith care.

21

6-1-3. Check of pressure
Make 0 pressure（Supply pressure） at 0.5～0.6MPa and check PRESSURE GAUGE
of dry air generator and DEW POINT CHECKER.
・PRESSURE GAUGE for 1st pressure check：0.5～0.6MPa
・PRESSURE GAUGE for 2nd pressure check：Ceasing time／Within 15min after power on 0.0MPa
After 15min after power on 0.1～0.25MPa
・DEW POINT CHECKER：To be green color.
At trouble time, re-check supply pressure. If there is no trouble, see” AC-2
INSTRUCTION MANUAL『Consumable parts replacement method』and maintain the air
pipe line.

226-2. Consumable parts

CAUTION
The consumables replacement shall be performed by our service engineer.
Request RIKEN KEIKI for consumables replacement.

6-2-1. Detector
If the anode of open counter for detector of AC－2 should get dirty, it becomes
impossible to measure. When「Troubled on detector」was displayed or the deterioration
phenomenon of detector such as low detection efficiency, high noise and diversion of
measurement value, replace it. The frequency of replacement is about 1 year.
The old sensors to be replaced can be reactivated by overhaul. The overhaul of thissensor should be contacted to Riken Keiki.

6-2-2. Lamp
Replace when the lamp blows or illumination gets unstable. The life of lamp is 1500
hours.

6-2-3. Optical fiber
When unable to get UV Intensity, replace it with new one. The replacement frequency
is different from UV Intensity of the use. This shall be 1 year.

6-2-4. Pipe line maintenance
It is hinted that replacement frequency of MIST SEPARATOR ELEMENT is once in 2
years and that of membrane module is once in 4 years. Then, the high pressure is given
to the pipe line and checks the flaws, crack and other damages for deterioration could bechecked, replace that parts swiftly.

6-2-5. Activated carbon filter
The activated carbon filter is to adsorb ozone from ultraviolet rays and dissolve it. Whenthe dissolving power gets lower, replace it with new one.

23

7. Trouble case measures
7-1. Self-diagnosis at troubleThis is provided with self-diagnosis that each function check is made at electromotive
and operation time. When the trouble is checked, it is impossible to make normal
operation. Research the cause and take the appropriate measures.
Now, this shows the trouble at the following two methods.

・Function of AC-2 main unit：
At trouble, TROUBLE LAMP(red) will flicker｡

・Function of control PC：
At trouble time of software, it shows error message on the display.

CAUTION
When the control unit is scrambled at unexpected cause, there is the case thaterror message and light-on of TROUBLE lamp could not be carried out.

7-2. Measures at trouble
Stop the operation and remove the trouble cause by seeing the next page. Afterremoving the cause, re-operate it and check whether trouble phenomenon will re-appear
or not.
If trouble should re-appear with unknown cause or different trouble should appear
continuously, note down the trouble cause and inform it to Riken Keiki.
If there is the possibility that any harm could be given to human body by this trouble
phenomenon, contact Riken Keiki without checking this re-appearance.
When the trouble data is measured, be sure to save this trouble data. In most cases,
this will work for research of trouble cause.

24

７-３. Before trouble to be considered
TroubleCannot be poweron

Can make poweron but cannot
operateCommunication
fails though AC-2
for Windows is set
up.
Communication fails
though AC-2 forWindows is set up.

Cause considered
No plug into electric
outlet of power cord
No power in theelectric outlet.

Measures
Make main switch off andplug right power cord in theelectric outlet. Then, makepower SW on.

Electric FUSE isblown.

After checking why FUSE
blew and found no problem,
replace the fuse.

The breaker on therear side of LC1 isbroken down.

Make main SW off andafter turning up
breaker, make power
SW off.

SAMPLE DOOR coveris open.

Close the cover and it
automatically operates.

Connection of
RS-232C cable fails

Re-connect RS-232 C
cable connection

Communication trouble Re-start up the mainby prompt
unit and AC-2 forelectromagnetic noise. Windows.

Just after power
on, TROUBLE
LAMP（red）will
flicker.

Flicker showing
function check.

TROUBLE LAMP
（Red）will flicker.

The compressed airpressure is down.

TROUBLE LAMP
（Red）will flicker.

Lamp is not lit.

Trouble ofdetector isTroubled detector.
displayed.
Light Adjuster
cannot be① Optical fiber isadjusted. UVdeteriorated.
Intensity (Max) will ② Lamp is at trouble.
be on.

No trouble is when put
out within a few
minutes.
Check the compressed
air and re-start themain unit.
① Re-start the mainunit.
② Replace lamp.
Replace detector.
① Replace opticalfiber② Replace lamp.

25

Notes

How to replace fuse
(1) Turn the cap of the fuse holder counterclockwise to remove it.
(2) Replace the fuse attached to the cap with a new one.
(3) Put back the cap.

CAUTIONUse a specified fuse.
If fuses others than the specified one are used, damages of the unit orabnormal operations may occur.

Fuse specifications and characteristics
250 Vac T2.5AL

26

8. How to stop operation① When Measurement Form is open by Display/Controller（personal computer）, closeit.
② After changing over POWER SW. on the surface panel of LC1 from ON（｜ side）toOFF（０ side）, make breaker off on the rear of LC1.
③ Close the original stopper of compressed air. Or, stop the compressor.
④ When water is deposited in MIST SEPARATOR, turn the DRAIN COCK to the rightand exhaust it. After exhausted out, be sure to DRAIN COCK.
⑤ Close the Windows and make off the power of personal computer,display,and
printer.

＊NOTE
Though the main unit remains OFF, start up AC-2 for Windows and themeasurement data can be seen.

27

9. For relocation
Please follow “４－１．Handling at mounting” when you relocate.
In addition, please refer to “４－２．Cable connection”“４－３．Piping”“４－４．Optical fiberconnection”.

28

10. Definition of words
Slope
This is the slope of graph between the energy of UV rays and photoelectron yield. It will
be a hint of photoelectron emission.
Threshold energy
This is the threshold energy to start up photoelectron emission.
Work function
This is the required energy to take out 1 pce electron.
Ionization potential
This is the lowest energy required for ionization of molecule and valence band
maximum energy of semiconductors.
The energy of UV rays
Energy per one photon of radiation light beam. By wave length of radiation light, it canbe calculated with following chemical formula.
(Energy [eV])=1240/(Wave length[nm])UV Intensity
Whole energy of radiation light per one hour. This can be calculated by output current ofphoto diode.(UV Intensity[nW])＝(The number of the photon of UV ray par 1 min.)×(energy[eV])÷0.625
By photoelectron spectrum measurement, UV Intensity will be 5.90eV.
Light correction
As there is the difference of every energy UV Intensity, correct it. Suppose that the yield
will be in direct proportional to UV Intensity. it shall be corrected by the following formula.
(The counting rate after correction) ＝ (the counting rate before correction) ÷ (The
Number of photon)×(The Number of photon of 5.90eV)29

11. Measurement principle
11-1. Measurement principle of photoelectron
An electron emitted from a sample surface moves several μ meters toward thedetector.(This is called the “Mean Free Path of electron in air”.) After that, the electron
attaches to an oxygen molecule, and it drifts to Anode(A) through Suppressor
Grid(Gs)and Quenching Grid(Gs).The intensity of the electric field is increased by highvoltage. When the electron approaches the Anode(A), the speed is accelerated by theintensified electric field. Then, an electron slide is triggered. As a result, the energy from asingle electron is amplified up to 105 ～ 107times,and the discharge pulse signal isgenerated in the preamplifier output(Vs).When the low energy electron counter receives
discharge pulse signal it transmits the electron detection signal to the controller, andchanges the Quenching Grid Voltage(VGq) and the Suppressor Grid Voltage(VGS) as
shown in the drawing below. The Quenching Grid erases the discharge by lessening thevoltage gap to the anode(A). The Suppressor Grid captures the positive ion generated atdischarge, and prevents the electron from entering into the detector as the discharge iserased.

Controller
Detector

Preamp V S

A

V Gq

Gq

e

Gs

VA

V Gs

S
Stage

Fig 10-1-1 Open counter
Gs ： Suppresser Grid

Gq： Quenching Grid
S：Sample

A ： Anodeeﾞ30： Electron

11-2. Measurement of photoelectric work function
AC-2 consists of lamp, spectrometer, open counter, controller, X-Z stage and personal
computer.
UV
lamp

Spectrometer

OpticalController

Open-counterｅPersonalcomputerSample：Ultraviolet rays

Sampleｅ ：Electron

Ｘ－Z stage
Fig.10-2-1

For light source, heavy mercury lamp is used. By diverging the light beam of

Photoelectron

wavelength 200 ～ 300 n m emitted from lamp into the arbitrary wavelength byspectrometer.
The intensity of light emitted from the ultraviolet lamp which enters the spectrometer iscontrolled by the light adjuster. and it enters the spectrometer. The spectrometer selects
the desired wavelength of UV light, and irradiates the result, photoelectrons may beemitted from surface(several Å tohundreds of Å), due to photoelectrons
30
effect.
20
The photoelectrons emitted are counted
10by the detector and open counter. The
result is then printed or displayed on a
0
CRT after analysis by the AC-2
3.4
5.0
6.2
software. This instrument is operated by
Energy of ultraviolet
a PC utilizing Windows.
When a surface is bombarded with a
Fig.10-2-2
slowly increasing amount of ultravioletenergy, photoelectrons start to emit at a
certain energy level. This energy level iscalled the “Photoelectron Work
Function(Work Function).”When the photoelectron output is plotted on an X/Y axis, with horizontal axis as the UVenergy applied , and the vertical axis as the standardized photoelectron yield ratio(Yieldˆn,or Y), the result is a line with a specific slope of degree(Y/eV).

31

12. List of Product Specifications
12-1. Product specifications
12-1-1. Specifications of the main unit
Item
Model
Measurement
methodStandard specifications
AC-2
Low energy electron counter method

Photoelectron Measure
Energy-scanning
UV Intensity Measure
Energy-scanning

3.4～6.8eV（364～182nm）

Repeatability precision（Standard deviation）

Work function 0.02eV
Log the counting rate 0.03logCPS（at 2.7logCPS）
Standard time required for work function measurement：
Approx5min（10 sec／1 energy）

Measurement
time
Ultraviolet rays
lamp
Ultraviolet rays
spot size
Spectrometer3.4～6.2eV（364～200nm）

Deuterium Lamp
2～4mm square

Grating spectrometer
50mm×50mmMax Thickness 10mmMax
SampleSAMPLE STAGE, Center 1pt measure
SAMPLE STAGE 50mm×50mm Ni grating metalStage
Z axis（Manual）：10mm
 Operation location: Indoor 2000 meters above sea level or lower
Operating TRANSIENT OVERVOLTAGES up to the levels ofenvironment
OVERVOLTAGE CATEGOLY II
conditions
 Short-term TEMPORARY OVERVOLTAGE: 1300 V
 Long-term TEMPORARY OVERVOLTAGE: 350 V
 POLLUTION DEGREE 2
Ambient temp/humidity 15～35℃、Below 60％RH
Power source
AC100-240V 50/60Hz 500VA(MAX)AC-2 LC1(Light Source Part)：
approx. 600(W)×450(D)×310(H)mm
Dimensions
AC-2 DC1(Measuring Part)：
approx. 600(W)×450(D)×360(H)mm
AC-2 LC1(Light Source Part)：Approx 40kg
WeightAC-2 DC1(Measuring Part)：Approx 50kg

32

12-1-2. Display/controller specifications
Item
Display
Control computer (PC)

PrinterOS※

Specifications
Size: 17 inch or more
Resolution: 1024 x 768 or more
Desktop type
Processor：1 GHz or more 32-bit (X86) processor
Memory：Above 1 GB RAM
Hard disk 16 GB free space
RS-232C with port(D-SUB 9 pin)
CD-ROM or DVD-ROM drive
Mouse
Color, Ink Jet method
Windows

12-1-3. Software function specifications※
Functions
Work function measurement

Description
By measuring photoelectron spectrum, the work
function or ionization potential can be determined.
Function for Measurement ofMake up Calibration Line. Based on it, thethicknessthickness is calculated from the counting rate.
Automatic light beam adjustment
If load in the target UV Intensity, UV Intensity is
adjusted automatically.
Automatic system start up function Initial of the system and anode voltage of detector
is automatically set up.
Cut and paste function
The measurement data is made use of by otherapplication software through cut and paste.
※The description of software will be Japanese if OS is Japanese. For other country case,it will be English.

12-1-3. CE marking compliance directive and standard
Conforms with the protection requirements of the Council Directive 89/336/EEC relating
to Electromagnetic Compatibility, by the application of the following EMC standards :EN 61326-1 2013
Conforms with the protection requirements of the Council Directive 73/23/EEC relating
to Low Voltage Directive, by the application of the following LVD Standards
IEC 61010-1 201033

12-2. List of configuration
12-2-1. Standard components
Description
Measuring Part
Light Source Part

Model
AC-2 DC1
AC-2 LC1

Q’ty
1
1

Notes
See the specifications of the main unit.
See the specifications of the main unit.

Description
Display
Personal computer
Printer
Operation system
Power cable for LC1
Power cable for DC1
Conversion plug
RS-232C cable(Between PC-LC1)
Optical cable(Between LC1-DC1)
Detector
Optical fiber
D2 lampStandard sample
Standard sample hold coverTweezers
Spanner

Q’ty
1
1
1
1
1
1
1
1
1

Notes

System soft(CD-ROM)
INSTRUCTION MANUAL
Warranty

11
112-2-2. Standard accessories

1
1
1
1
1
1
1

See the display/controller specifications.
See the display/controller specifications.
See the display/controller specifications.
See the display/controller specifications.

See the specifications of the main unit.
See the specifications of the main unit.

FOR MICRO
replacement

34

MIST

SEPARATORELEMENT

12-2-3. Special accessories
Description
SUS make SAMPLE
STAGE
Power sample tray
Compressor
Kelvin probe

Model

Notes
20pcs/1 set※

C3-AIR
FAC-1※The supply condition of compressed air is pressure at 0.5～0.7MPa and flow rate atover 5.5NL/min. The piping should be nylon or polyurethane tube with overφ6mm(outerdia)、φ4mm(inner dia)、and over 0.9MPa(pressure proof).

12-2-4. Option（Maintenance parts etc）
Description
Detector
Optical fiber(For spot size 2-4mm)
D2 lamp
Activated carbon forozone filter

Model
LE-6110Notes

ELEMENT FOR MISTSEPARATORELEMENT FOR MICROMIST SEPARATOR
Membrane module35ＡＣ－２ for Windows－How to measure the Work Function or
the Ionization Potential－

Contents

１.
２.
３.
４.
５.
６.
７.
８.
９.
１０.
１１.
１２.
１３.
１４.

Outline…………………………………
1
Caution…………………………………
1
How to use this manual ………………………… 1
Flow of measurement …………………………… 2Standby of equipment …………………………… 3Standby of system ……………………………
3
Measurement of photoelectron spectrum ……… 4
Quantity of light correction coefficient ……
12
Determination of work function or ionization potential … 14
Multiple graph ……………………………
18
Display of quantity of light correction coefficient 20
Print-out ……………………………………
20
How to finish windows ………………………… 21
Other function …………………………
22

１．Outline
Here in this manual, how to seek for work function and ionization potential is described bymeasuring the sample threshold energy with AC-2.

２．Caution
This manual is described in the premise of following.
① AC-2 and personal computer are set up correctly.
② AC-2 for Windows is correctly installed.
③ Operator knows Operation of Windows.
④ Operator knows the meaning of work function, ionization potential and relation withphotoelectron emission.
Prior to this manual, read PHOTOELECTRON SEPCTROMETER AC-2 INSTRUCTION MANUAL
and Windows INSTRUCTION MANUAL.

３． How to use this manual
For users who use AC-2 first, prepare the standard sample and tweezers. Start to measureaccording to this manual. At that time, the required set condition, see the sample. The
experienced users, see ＊Noteand start to measure.

Read this manual well and arrange to measure correctly.

1

４．Flow of the measurement(The number corresponds to chapter)
5.Standby of equipment
Compressed air supply，PC power on，OS startup，AC-2 power on，Warming-up (Approx 30 min)6. Preparation of system
AC-2 for Windows setup，Connection（Approx 10 min）

7.Photoelectron spectrum measurement
Measurement form，Setting the measurement conditions, Sample setup，Measurement，Sampling out

8. Quantity of light correction coefficient measurement
Measurement Form，Measurement condition setup，Measurement

9. Work function, Determination of Ionization potential
Data Manager Form，Light correction，Display, Threshold energy

10.Maltiple Graph

11.Quantity of light correction

12.Print

coefficient display

13.Finish
Finishing AC-2 for Windows，Finishing of AC-2，Compressed air, Drain out, Finishing the PC

2

５．Standby of equipment
It is prepared to measure by AC-2.
①Supply the compressed air（0.5－0.6Mpa）.When supply it by pump, make this power on. Whensupply from factory pipe, open the original supply valve.
②Make POWER SW of personal computer ON and start up Windows.
③Check that Windows is started up.
④Make on the breaker power on rear side of LC1.
⑤Make on ON（｜side）POWER SW. on the surface panel LC1.
⑥Warming up starts with power ON. After completion of warming up（After about 30min）
POWER/STANDBY LAMP will show green lamp light on.

＊Note
For checking the past measurement data, you may proceed to “6. Preparation of system”
just after ③.（After warming up and connection, start to measure.）

６．Standby of system
Prepare the personal computer and AC-2 for Windows.

6-1.Standby of system①Start up AC-2 for Windows. Example）start up from program of Start button.
②Open Main Form, and Data Manager Form.

AC2 Desk Top

FolderMeasurement (M)Status Window3

6-2.Connection①Enter the Measurement(M)－Connection(N).
②Prepare Connection. Connection means the establishment of communication with main unit,
Initialize Light Adjuster and Setting Anode Volts. The existing status is displayed on Status
Window.
③After about 10minutes, Connection is finished. Anode Voltage and ready condition of AC-2 aredisplayed. Click OK on message box.

 Caution
When make other application software treatment or that of AC-2 for Windows during
connection or measurement through OS spec, there is the case of inability forcommunication. During communication treatment with main unit for connection andmeasurement, do not let personal computer make other treatment.

７．Measurement of photoelectron spectrum
7-1.Make up folder and Work Function Form getting started up①Click the icon of AC-2 Desk Top and make it active.
②Enter File(F)－Create Folder(W).
③Enter Folder name. Example）test④Check that the prepared Folder is active.
⑤When select Measurement(M)－Work Function, the work Function Form is open.

＊Note
When the another form is active, Measurement Form cannot get started up.

＊Note
When Measurement Form is started up, close beforehand and open Work Function
Form.

4

7-2.Explanation of Work Function Form

④

①
③

②

⑤

①GraphThe measurement data is depicted on the Graph.
②Data Table
The measurement data is listed.
③Control List
The required condition for measurement can be entered. After clicking the right side box for each
items of words and number, enter from key board. For selection, when click the right side box, ▼button is displayed. When click it, the selection menu is displayed. Select it from this.
④Folder Window
This shows the Folder filing the measurement data.
⑤Quantity of light correction coefficient Window
This displays Quantity of light correction coefficient used for light correction.
⑥Menu Bar
This changes over measurement and form.
⑦Task Bar
This shows the existing condition and changes over form.

＊Note
The default of Control List is in the same condition as last measured data.

57-3.Measurement condition setup
Enter measurement condition from Control List.
①Enter the sample name. The name entered here will be name of Work Function Data Filedisplayed in the Data Manager Form. Click the right side box of Sample Name. Operate key andpress enter. When re-write the sample name entered already, press space key after having clicked.
Example）TEST②When click Folder Window, it shows folder. Select the folder filing Work Function Data measuringfrom now on. Example）test③Enter Start Energy. Example）Open List Box of Start Energy and select 4.20eV.
④Enter Finish Energy. Example）Open List Box of Finish Energy and select 6.20eV.

＊Note
It is impossible to make light correction for Measure Energy to be in range of
6.25-6.80eV.
⑤Enter Step. Example）Open List Box of Step and select 0.10eV.

＊Note
When make preliminary measurement, it shall finish sooner by spreading Step.

⑥ Set up Counting Time. Example）10⑦Set up UV Intensity. Firstly enter Target of UV Intensity Adjustment. Target of UV Intensity
Adjustment should be set up between UV Intensity(Max) and UV Intensity(Min). Example）10⑧Select Measurement(M)-UV Intensity Adjustment(L) of Menu Bar. As message box of UVIntensity Adjustment is displayed, click YES(Y) and start up automatic control of UV Intensity.
When finish controlling, UV Intensity will be the same as Target value. When finish UV Intensity
Adjustment, the message box which finishes set-up will open and click OK. Now, the black color ofControl List will be green at±5％ of target, yellow at ±5～20% of target, and red at over±20％
of target.

＊Note・ Appropriate UV Intensity differs by sample. make preliminary measurement ofphotoelectron spectrum and arrange so that an appropriate slope can be obtained.
・ When Target of UV Intensity Adjustment is near from the Minimum or maximum of UVIntensity, there is the case set at within ±5％ of set value.

6

Caution
When open the cover of SAMPLE DOOR during measurement of UV Intensity, thesample stage may move suddenly and give inquiry by it. Or there is the case that UVIntensity gets troubled.

⑨ Input information of measuring sample, material etc in Notes１.
⑩Select Quantity of light correction coefficient out of Quantity of light correction coefficient
windows and make double click. When make light correction from the back, make right side click
for Name of Quantity of light correction coefficient on Control List and then delete it.
Example）Adjustment Data Delete⑪Input Power Number. Power Number is that of vertical line for data to be displayed on Graph.
Input the decimal number below 1. Example) 0.5

7

7-4.Sample mounting① Enter Measurement(M)-Sample(S) on Menu Bar.
② As message box of sample stage confirming the movement is displayed, click YES(Y).
③ Check that the roaring sound of sample stage could not be heard.
④ Push the cover of SAMPLE DOOR on the part named “Push” and when tick sound could beheard, release your hand.

⑤ SAMPLE DOOR cover is open. Check that OPEN LAMP will flicker in red.

 Warning
When OPEN LAMP cannot flicker in red, there is the trouble of interlock trouble. In thiscase, even if SAMPLE DOOR cover is open, there is the possibility that sample stage
will move.
⑥ Put SAMPLE to the left side of you on SAMPLE STAGE.
Height gauge

SampleProbeHeight Handle⑦ Control the sample stage height level. Put SAMPLE on left side of SAMPLE STAGE. Next,
Draw HEIGHT GAUGE and sandwich the SAMPLE between SAMPLE STAGE. Then, Rotate
Height Handle of sample stage so that the top end will correspond to the height of measuringunit.
8 Warning
When put a part of sample in higher position than HEIGHT GAUGE probe, there will bepossibility that the main unit or sample may be damaged by the crush of detectors. Thenbe sure to control the height.

⑧ Fasten Sample by sample clip in the center of sample stage.
SampleSample Clip

⑨ Close the SAMPLE DOOR and push in the vicinity of “Push”. Release hand until it sounds
ticking.
⑩ Check that SAMPLE DOOR is closed and click OK on screen.

7-5.Measurement① When select Measurement(M)-Measurement(G) of Menu bar, the photoelectron spectrum
measurement will start.
② When measurement starts, Graph and data shall be displayed and the counting rate of eachenergy is plotted. The horizontal line of Graph is the energy of UV rays and the unit is eV. The
vertical line is “n” multiplier unit [cps^n] of the counting rate. This “ｎ”is the power number. The
upper limit of vertical line will automatically be about 2000^n.
③ After measurement of background, whenever the energy of UV rays is changed, the counting
rate will be counted.

9

④ When the measurement is finished, the message box showing finish will open and click OK.
The measured photoelectron spectrum data is saved in Folder in Work Function Data File.

 Caution
From OS spec, when make treatment of AC-2 for Windows and other application soft
during connection and measurement, there will be possibility of no communication withmain unit. While communicating with main unit such as connect, measurement, do not let
the computer do other treatment.

＊Note
Measurement is interrupted by Measurement(M)-Measurement Cancel(G).

⑤When UV Intensity is small or the area of measure energy is not appropriate, control themand start re-measurement.

Step 0.05eVBig Start energy.

Low UV Intensity.

High UV Intensity10

7-6.Sampling① Select the Measurement(M)-Sample(S) of Menu Bar.
② Check that the message box is displayed and active sound of sample stage becomes off.
③ By pushing SAMPLE DOOR on the part of Push marking, release hand after tick sound could
be heard.
④ SAMPLE DOOR gets open.
⑤ Take out sample.
⑥ Close by pushing SAMPLE DOOR on the part of Push marking and release hand after ticksound could be heard.
⑦ Check that SAMPLE DOOR is closed and click OK on the screen.

7-7.Setting Anode Voltage, Initialize Light Adjuster
After connection, when continue to measure for a long hour of over 24 hours or temperature andatmospheric pressure varies, re-set Anode Voltage and do Initialize Light Adjuster.
The re-set of Anode Voltage shall automatically be carried out by operating Measurement(M)－Anode Voltage(V). Finished after about 5 minutes and as the message box is open, click OK.
Initialize Light Adjuster shall automatically be carried out. Finished after about 5 minutes and as themessage box is open, click OK.

7-8.How to finish Work Function Form
Under active condition of Work Function Form, finish Work Function Form by File(F)－Close(X).

11

８．Quantity of light correction coefficient
8-1. Start-up of Light Spectrum Form
① By Data Manager, click the folder and make it active.
② When select Measurement(M)－Quantity of light correction coefficient(L),Light Spectrum
Form shall open.

 Caution
When Measurement Form is started up, close in advance and open Light SpectrumForm.

8-2. Explanation of Light Spectrum Form
④
③

②
①

⑤
①Data Table
Make list of the measurement data.(Space before measurement starts)②Control List
Enter the required conditions for measurement(How to enter is the same as Work Function Form.)③Folder Window
This indicates the folder filing the measurement data.
④Menu Bar
This makes measurement and change-over of form.
⑤Task Bar
This indicates the current condition and changes over the form.
128-3.Measurement condition adjustment
Input measurement condition from control List.
① Input the Sample Name. The name inputted herewith will be the name of Light Spectrum
Data File shown on Data Manager Form. Click the right side box and input the word into
keyboard. Then, press Enter. When try to re-write the Sample Name, input by pressing space
key after click. Example）test② When click Folder Window, it shows folder. Select the folder filing Light Spectrum Data to bemeasured from now on.
③ Input Start Energy. Example）Open the List Box of Start Energy. Select 4.20eV.
④ Input Finish Energy. Example）Open List Box of Finish Energy. Select 6.20eV.
⑤ Input Step. Example) Open List Box of Step. Select 0.10eV.

＊Note
When make preliminary measurement, this finishes earlier by widening Step.

⑥ UV Intensity shall be set up. When measure at the same value with the current UV Intensity（UV Intensity）,input the value of±５％ of UV Intensity to Target of UV Intensity Adjustment.
Example）10⑦ When set UV Intensity newly, input Target of UV Intensity Adjustment and selectMeasurement(M)-UV Intensity Adjustment(L) of Menu Bar.
⑧ Input the information such as measurement condition at Notes１.

8-4.Measurement① By selecting Measurement(M)-Measurement(G),start measurement.
② When start measurement, Quantity of light correction coefficient of the each energy is shown on
data table.
③ When finish measurement, the message box is open and click OK. As the message box isopen, click YES(Y) button and save it. The measured light spectrum data is saved in the folder
as light spectrum data file.

 Caution
From OS spec, when make treatment of AC-2 for Windows and other application soft
during connection and measurement, there will be possibility of no communication withmain unit. While communicating with main unit such as connect, measurement, do not let
the computer do other treatment.

13

8-5.How to finish Light Spectrum Form
Under active condition of Light Spectrum Form, close the form from File(F)-Close(X).

９．Determination of the work function or the ionization potential
Click Data Manager button of Task Bar and make Data Manager Form displayed. Then, operate
Display(D)-Refresh Data(D).

9-1.Explanation of Data Manager Form
④

⑥
⑧

⑦

②

⑨

①
③

⑤
① Treedisplays folder into tree form.
② Data Manager
Displays data or folder.
③ List Table
Displays data outline.
④ Menu Bar
makes Print, Delete, Create Folder, Move, and Rename of data
⑤ Task Bar
indicates the name of data or folder selecting now and changes over form.
⑥ FolderThe measurement data is stored.
⑦ Query
Researching result.
⑧ Work Function Data File
⑨ Light Spectrum Data File
14

9-2.Light correction① Firstly, Open the folder.

Example)test of work function data file to be corrected.

＊Note
The folder with ＋ in left is provided with much lower layers. When click ＋, the lower
folder can be displayed. At this time, ＋ becomes － . When click － ,lower folder can
be non-displayed.
② Click and select Light Spectrum Data File［Example）TEST］to use for correction, operate thecopy( C ) of pop up menu by right click.
③ Select Work Function Data File［Example］TEST］ and operate the Paste (P) of pop up
menu. When correction is made, name of quantity of light correction coefficient on list tabledisplays name of quantity of light correction coefficient used for correction. ［Example）TEST］.

＊Note
When ceases light correction, click Name of Quantity of light correction coefficientwith right hand and operate Adjustment Data Remove.

 Caution
When delete Light Spectrum Data File related with Work Function Data File,database may cause trouble. In this case, there is the case to replace with back up of
database.

15

9-3.Display of Graph
Select Work Function Data File［Example］TEST］desired to analyze and making active File(F)－Open(O), open Single Graph Form.

①

③
⑧

②
④

⑦

⑤
⑥

① Menu Bar
This makes data copying.
② Graph Box
Display the measurement data as Graph.
③ Pop up menu
To seek for the threshold of graph, this is used when draw Ground Level and Regression Line.
When there is the mouse pointer located in the Graph Box, it is displayed by right click.
④ Control List
This can input the depicted condition of Graph.
⑤ Data Table
Display the measurement data as table.
⑥ Task Bar
Indicate the coordinates of mouse pointer on Graph Box or change over the form.
⑦Ground Level⑧Regression Line16

9-4.Determination of threshold energy
This determinates the threshold energy of measured spectrum. This value is interpreted as work
function and ionization potential.
①Click Data tab of Control List and by making Power Number at 0.5, make Y axis for a squareroot of yield.

 Caution
Appropriate power number shall be different from material each. Check it with thesis etc.
Generally speaking, it is said that the power 0.5 is for the sample material, the power0.3(1/3) is for semiconductor and the power 0.5 is mostly for organic material.

②Click Disp tab of Control List. Control the display condition of Graph suitably.
For numbers etc, input it from keyboard after click the box.
When check for check box, it becomes on and when make it off, it will be off.
For example）Minimum of X Axis [eV]：4.20, Maximum of X Axis [eV]：6.20, Scale Space of X
Axis [eV]：0.10, Minimum of Y Axis [CPS^0.5]：0.0, Maximum of Y Axis [CPS^0.5]：40.0, Scale
Space of Y Axis [CPS^0.5]：4.5, Back Color：default, Center Area Color：default, Scale of X
Axis：On, Scale of Y Axis：On, Scale Color：default, Grid：Off, Dot Style：default, Dot Size：
30, Dot Color：default, Line Display：Off, Line Style：default, Line Color：default, Selected Dot：
On, Selected Dot Style：default, Selected Dot Size：35, Selected Dot Color：default.
③By guessing the plain part of Graph, select the range by click and drug. After selection by rightside, display the pop up menu. Then, click the Ground level.
④By guessing the range of Regression Line, select by click and drug. After selection by rightside click, display the pop up menu and click Regression Line.
⑤On the Data tab of Control List, Work Function, Gradient of Regression Line (slope) aredisplayed.
⑥By Edit(E)-Copy(C),graph and data can be copied on the clipboard and it can be used in otherapplication of Windows. After click on the display desired to copy in advance, start up
Edit(E)-Copy(C).
⑦When close the form, start up File(F)－Close(X). Now, when the form is closed, this shall be
updated.

 Caution
Single and Multiple Graph Form cannot be displayed over 5 copies. Close unnecessary
Form.

17

１０．Multiple Graph
By displaying upto 5 copies graphs on Multiple Graph Form concurrently, the comparison can be
made. The graph for this comparison shall be required in the same folder.

10-1. How to open Multiple Graph Form
① Open the form provided with Graph on the tree（①）of Data Manager Form, and let the desired
data displayed on Multiple Graph Form of Data Manager（②）.

②①② Click the icon of Work Function Data File desired to depict as Graph by holding on pressing Ctrl
key, all the those file can be selected simultaneously.
③ Open the pop up menu by right side click and click open.
④ Multiple Graph Form shall be open.
⑤ When close form, start up File(F)－Close(X).

18

10-2.Explanation of Multiple Graph Form

① Except the Graph of data selected on Sample Name, it is depicted at the same density in “Not
Selected Sample Overlay Level of Disp tab.”② The selected data at Sample Name is displayed on Data Table.
③ When select a different data, click Sample Name. Then, as the button is displayed and click it,
the data name of others shall be displayed. Select it.

19

１１．Display of Quantity of light correction coefficient①After selecting Light Spectrum Data File［Example］TEST］desired to display, start up File(F)－Open(O) and open Display Form.
②By Edit(E)-Copy(C), paste the data on clipboard and can use the Windows through from otherapplications.
③When close the form, start up File(F)－Close(X).

１２．Print-out①After selecting the Work Function Data File［Example］TEST］desired to print out, start up File(F)－Print(P).
②As Print Setting Box is displayed, check it and click OK.
③Print Preview Form shall be displayed.

20

④ After checking Graph to display, start up Print(P)－Print(G).

 Caution
・When print out Single Graph Form directly, there is the case that the drastic changed
condition could not be reflected.
・The data is printed out by the printer designated normally with OS.
・Print condition is set up with OS.

１３．How to finish windows①Repeat the File(F)－Close(X) and close all the child form（Measurement, Data Manager etc）.
②Close the main form by File(F)－Close(X).
③After changing over POWER SW on the surface panel of main unit (LC1) from ON(｜side) toOFF(０ side), make off of breaker on rear side of LC1.
④Close the main cock of compressed air. Or stop the operation of compressor.
⑤When water is deposited in MIST SEPARATOR, turn DRAIN COCK to the right and exhaust it
out. After exhaust out, be sure to close DRAIN COCK.
⑥Finish Windows and stop personal computer, display and printer.

Drain Cock21

１４.Other function
14-1.Data Manager
When start up AC-2 for Windows, this shall be displayed.

14-1-1.File(F)① Open(O)：Open the Data File.
② Create Folder(W)：New Folder is made up.
③ Save Data(A)：A part of the measurement data is saved as CSV form.
④ Data base-Import：Data base is imported under Folder.

 Caution
When import other material than Data base exported from AC-2 for Windows, Data base has
the possibility to break down.

⑤ Data base-Export：Export Data File or Folder as Data base.
⑥ Data base-Repair and Conditioning：This makes the Repair and Conditioning of Data base.
⑦ Print(P)：Print the Data File.
⑧ Delete(D)：Delete the Data File or Folder.
⑨ Rename(R)：Change Data File or re-name the Folder.
⑩ Close(X)：Close the form.
14-1-2. Edit (E)① Return(U)：Put the moved away Data File or Folder where it was.
② Cut(X)：Cut out Data File or Folder.
③ Copy(C)：When make the light correction, designate Light Spectrum Data File.
④ Past(P)：Correct Work Function File by Light Spectrum Data File appointed by copy.
⑤ Select All(A)：Make the data file all inside of folder or folder itself active.

22

⑥Search(S)：Search Data File. Input searching conditions and click the searching start box. Whenclick the button, the searching will start. The searching result is filed in Query and displayed in
Data Manager.

Data Manager
Query
Search conditions.

Click, Search start.

14-1-3. Display(D)① Status Bar(S)：This changes over the appear/disappear of Status Bar.
② Refresh Data(D)：Update the latest information.
14-1-4. Window(W)① Cascade Display② Tile Vertical Display③ Tile Horizontal Display④ Window：This displays the form to be opened now.

23

14-2.Display
Make Data file desired to display Data Manager at active condition and it shall be displayed or bystarting up File(F)-Open(O) by making double click for icon of Data file desired to display.

14-2-1. File(F)① Print(P)：Can print out.

 Caution
When print without finishing the form after changing Graph condition, there isthe case that the change will not work. After close once, print out.

14-2-2. Edit(E)① Copy(C)：Copy graph, table and status on clipboard.
14-2-3. Display(D)① Graph(G)：Change over On/Off of graph.

2414-2-4.Data tabs
① Power Number：Change the power number of vertical line.
② WF Line Display：Change over appear/disappear of Regression Line.
③ Grand Level ON：Change over appear/disappear of grand line.
④ Display of Difference between Data and Grand level：Change over the calculation method ofground level(Normally not checked).

CheckedNot checked⑤ Notes
14-2-5.Disp tab① X Axis：Minimum, Maximum, Scale Space.
② Y Axis：Minimum, Maximum, Scale Space.
③ Back Color④ Center Color⑤ Scale of X Axis／Y Axis：Appear/Disappear of scale.
⑥ Scale Color⑦ Grid：Appear/Disappear of grid
⑧ Dot：Style, Size, Color.
⑨ Line：Regression Line Style, Size, Color.
⑩ Selected Dot：Appear/Disappear of Dot when select Ground level and Regression line, Style,Size and Color.

14-2-6.Pop up menu

① Data Clear
Clear up Ground Level and Regression Line.
② Ground Level③ Regression Line25

④ Difference between Data and Regression Line
Make the different portion between regression line and measurement data as new data file. A
sample name of different portion data will be（Original sample name）_Dif.
Difference

Difference

14-3.Print Form
Make the data file desired to print out at active condition by Data Manager and it is displayed by
selecting the print.

14-3-1. Print(P)① Print Setting(S)：This can check the printing condition. Now the set printer shall start from OS.
② Print(G)：Start printing.

26

14-4.Main Form
This is displayed when close all the other forms.

14-4-1.Display (D)① Data Manager(D)：This displays Data Manager Form.
② Font：This can change the Font of display.

 Caution
When change Font inadvertently, there will be the possibility of making error.

14-5.Back up of Data base
It is recommended to make the back up data of ac2.mdb regularly.
The “ac2.mdb” is the data base stored with the measurement data of AC-2. At an initial condition, it
is located in AC-2 for Windows of Program file of “c” Drive.

27

ＡＣ－２ for Windows－How to measure the Thickness and Counting rate－

Index

1. Outline ..........................
2. Caution ...........................
3. How to apply this manual ..........
4. Flow of the measurement ...........
5. Preparing the instrument ..........
6. Preparing the system ..............
7. Measuring the calibration data ....
8. Creating the calibration line .....
9. Measuring the thickness ...........
10. Displaying the data ..............
11. Printing .........................
12. Ending ...........................

1
1
1
2
3
3
4
10
12
18
22
23

1. Outline
This instruction manual indicates how to measure the thickness.

2. Caution
The following things should be done prior to the operation.
① AC-2 and PC are correctly installed and set.
② AC-2 for Windows is installed.
③ The user has understood how to operate the Windows.
④ The user has understood the meaning of photoelectron, and the relationship withcontamination and quantity. Before reading this manual, read the “Photoelectron
Spectrometer AC-2 Instruction Manual”, “AC-2 for Windows Instruction Manual (How to measure
the Work Function or Ionization Potential)” and “Instruction Manual for Windows”.

3. How to apply this manual
If you are a beginner user, prepare the standard samples whose thickness are different
from each other, and tweezers. Then, start the measurement, referring to examples on eachsection.
If you are an experienced user, perform the measurement, referring to * NOTE on eachsection.
Read this manual carefully, and perform the correct measurement.

1

4. Flow of the measurement (The number is the paragraph in this manual.)
5. Preparing the instrument
Supplying compressed air, Turning on the personal computer, Standby the OS, Turning on the AC-2,
Warming up 30 minutes.

6. Preparing the system
Standby the AC-2 for Windows, connecting 10 minutes

7. Measuring the Calibration Data
Measurement Form, Setting the measurement condition, Setting the sample, Measurement, Taking out the
sample8. Creating the Calibration Line
Data Manager, Calibration Line, Calibration Line Form, Creating the Calibration Line

9. Measuring the thickness/ counting rate
Measurement Form, Calibration, Measurement condition, Setting the sample, Measurement, Taking out
the sample

10. Displaying the data
Thickness, Calibration Line, Calibration Data

11. Printing

12. Ending
Finishing the AC-2 for Windows, Finishing the AC-2, Stopping the compressed air, Releasing the drain,
Finishing the personal computer.

2

5. Preparing the instrument
Prepare the measurement on AC-2.
① Supply the compressed air（0.5－0.6Mpa）to the AC-2.If the compressed air is supplied
by a pump, turn the power of the pump on. If the air is supplied by the tubing of the factory,
open the valve.
② Turn on the PC and let the Windows start.
③ Confirm if the Windows starts.
④ Turn on the circuit breaker on the rear panel of the LC1.
⑤ Turn on the power switch on the front panel of the LC1.
⑥ In accordance with the power-on, warming-up starts soon. When the warming-up finishes
30 minutes later, POWER/STANDBY LAMP turns GREEN.

* NOTE
If you just want to confirm the data measured in the past, you can skip the orderfrom ③ to ⑥. (But, the measurement must be started after the warming-up finished.

6. Preparing the system
In this paragraph, you prepare the PC and AC-2 for Windows.

6-1.Preparing the system① Start the AC-2 for Windows e.g.) Startup with the start button in Program.
② Then, Main Form and Data Manager Form are open.

Measurement(M)AC2DeskTop

Status Windows36-2.Connection① Execution of Measurement(M)－Connection(N)② Connection starts. The meaning of the connection is “security of the communication with
the instrument”, “Initialize Light Adjuster” and “Setting Anode Volts”. The current
status is displayed on the “Status Window”.
③ The Connection finishes approx. 10min. later. The messages “Measurement finished” and“AC-2 initialize finished” appear on the message boxes. Then, click the OK.

 Caution
Depending upon the OS version, the communication with the instrument might bedisturbed by managing “AC-2 for Windows” or other application during the connection
or measurement. Do not activate another application on the PC while managing thecommunication like connection and measurement.

7.Measurement of Calibration data
Calibration Data becomes the base data for creating the Calibration Line. At lease 2 piecesof the standard samples whose thickness is acknowledged.

7-1.Creating a folder and Activating the Data Form
① Activate the AC-２Desk Top by clicking the icon.
② File(F)－Create Folder(W)execute.
③ Enter the folder name. e.g.）test④ Make sure if the created folder is active.
⑤ When execute the Measurement(M)－Calibration Data(D), Cal. Data Form becomes open.

 Caution
When another Measurement Form is active, close it and open the Cal. Data Form.

4

7-1.Explanation of Cal. Data Form
④
③

②
①

⑤

① Data Table
arranges the measurement data into a table.
② Control List
can enter the necessary conditions for the measurement.
③ Folder Windowshows the folder which files the measurement data.
④ Menu Bar
performs the switching of the placement/ removal of the sample, UV Intensity Adjustment,
and form.
⑤ Task Bar
shows the current status or changes the form.

57-2.Setting the Measuring Conditions
Entering the measuring conditions from Control List.
① Enter the sample name. The name entered here will be the one for Cal. Data File displayedin Data Manager Form. Click the right box of Sample Name and type some characters, and press
the Enter. If you re-write the sample name already entered, click it and press the spacebar. e.g.) TEST1，TEST2，TEST3 etc.
② When the Folder Window is clicked, the folder is displayed. Choose the folder which is goingto save the Cal. Data which is measured from now. e.g.) User’s name
③ Enter the Measure Count. e.g.) 20④ Set the Counting Time. e.g.) 10⑤ Enter the thickness of the standard sample in the “Thickness”.
⑥ Enter the Start and Finish Energy. e.g.) 5.9⑦ Set the UV Intensity. First, enter “Target of UV Intensity Adjustment”. Target of UVIntensity Adjustment has to be set between UV Intensity(Max) and UV Intensity(Min). e.g.)10⑧ Select the Measurement(M)-UV Intensity Adjustment(L)of the Menu Bar.
Automatic adjustment of UV Intensity starts. After the adjustment, the value UV intensity
becomes almost the same as that of the Target. The black color changes to Green within ±5%, yellow within ±5～20%, and red beyond ±20%.

＊Note
Appropriate UV Intensity depends on a sample. To get the appropriate slope, performthe preliminary measurement of photoelectron spectrum.

⑨Enter the thickness of the standard sample by the unit of angstrom (A).

＊Note
When contamination quantity is measured, enter an appropriate value whichindicates the contamination quantity.
⑨ Enter any information such as lot number in the “Note１”.

6

7-3.Setting the Standard Sample① Activate the Measurement(M)-Sample(S) of Menu Bar.
② The message to confirm the movement of the SAMPLE STAGE appears in the message box. ClickYES(Y).
③ Confirm the noise of the movement from the sample stage stops.
④ Push the position of the “PUSH” on the SAMPLE DOOR, release your hand when tick sound could
be heard.

⑤ The SAMPLE DOOR opens. Confirm if the OPEN LAMP blinks red.

! Warning
If the OPEN LAMP does not blink red, the interlock might be broken. In this case,the sample stage would move even while the SAMPLE DOOR is open.

⑥ Place the sample on the left-front of the SAMPLE STAGE.
Height gauge

SampleProbeHeight Handle

7⑦ Adjustment of the Height of the sample stage. Place the sample on the left-front of thesample stage. Next, pull the HEIGHT GAUGE as if press the sample with SAMPLE STAGE. And,revolve the HEIGHT HANDLE of the sample stage until the tip of the prove of the HEIGHTGAUGE matches the height of the measuring part of the sample.

! WarningIf even any part of the sample is placed higher than the probe of the HEIGHT GAUGE,
the sample might hit the detector. As a result, the sample or the instrument
might break. Adjust the height appropriately.

⑧ Place the sample on the center of the sample stage and fix it with the SAMPLE CLIP.

SampleSample Clip

⑨ Shut the SAMPLE DOOR, Push the door and release your hand when you hear tick sound.
⑩ Confirm if the SAMPLE DOOR is closed and click OK.

7-4.Measurement①

Once the Measurement(M)- Measurement(G)in Menu Bar is chosen, measurement of theCalibration Data starts.

② After the measurement starts, the data displays.
③ When the measurement finishes, message box which tells the ending opens. And, click OK.
The Calibration Data measured save in the Folder as Cal. Data File.

8

! Caution
The communication between the PC and the instrument might not be able to performdepending an OS if the AC-2 for Windows or another application is managed during
the communication. We recommend you do not allow the PC to manage other applications
during the communication.

7-5.Taking out the Sample① Choose the Measurement(M)-Sample(S) in Menu Bar.
② Confirm that the message box appears and the noise of the sample stage disappears.
③ Push the SAMPLE DOOR and release your hand when you hear the tick sound.
④ SAMPLE DOOR opens.
⑤ Taking out the sample.
⑥ Close the SAMPLE DOOR.
⑦ Confirm the SAMPLE DOOR closes and click OK.

7-6.Measuring the next standard sample
A few of the measurement data files for standard samples that have different thickness are
required to create the Cal. Line Data File.
Firstly, repeat 7-2～7-5 by changing the UV Intensity. And, find the UV intensity that makes
the counting rate of thinnest standard sample be approx. 2000CPS.
Next, measure another standard sample with the UV intensity. Measure the standard sample bythis UV Intensity. Create the Cal. Line Data File together with other data, which is generated
by the same UV intensity. Cal. Data Files to create one Cal. Line Data File must be stored
in the same folder.

7-7. Finishing the Cal. Data Form
When the Cal. Data Form is active, finish the Cal. Data Form by the File(F)－Close(X).

9８．Creating the Calibration LineCreating the Cal. Line Data File by using the Cal. Data File measured at Section 7. First,
click the “Data Manager” of Task Bar and display the Data Manager Form. And, perform the
Display(D)-Refresh Data(D).

8-1.Explanation of Data Manager Form
④

⑧
②

⑥
⑦
①

③

⑤

① TreeThis displays the folder like a tree.
② Data Manager
This displays the Data File or folder.
③ List Table
This displays the outline of the Data File.
④ Menu Bar
Print, Deleting Data Files, Creating Folders, Movement, Renaming⑤ Task Bar
This displays name of the folder or Data File currently chosen and changes the form.
⑥ Cal. Data File
⑦ Cal. Line Data File
⑧ Thickness･Counting Rate Data File10

8-2.Creating the Calibration Line
① Click the Folder which saves the Cal. Line Data File.
② Activate Measurement(M)－Calibration Line and create a new Cal. Line Data File.
③ Click the icon of the new Cal. Line Data File and change the name. e.g.) 1④ Click the Cal. Data File e.g.) TEST１, TEST２, TEST３ which are already measured,pressing the Ctrl to choose. And, right-click to perform the copy of the pop up menu.
⑤ Attach it on the Cal. Line Data File created at ①.
⑥ Double-click the icon of the Cal. Line Data File and let it open on the Calibration LineForm.

8-3. Explanation of the Calibration Line Form
④

①

②

⑤

① GraphDrawing the measurement data.
② Data Table
Tabling the measurement data.
③ Control List
Conditions to create the Calibration Line can be entered.
④ Menu Bar
Changing the measurement and form.
⑤ Task Bar
Changing the form.

118-4.Creating the Calibration Line
① The Disp tab of Control List conditions the Maximum, Minimum and space of the Graph.
And it makes the graph easy to see.
② Click and drag to fix the range of the Calibration Line.
③ Right-click to open the pop up menu and choose the Calibration Line.
④ Regression Line displays on the Graph and Calibration Line is created.
⑤ When close the form, perform the File(F) － Close(X). When the form closes, Data is
automatically renewed. And the Calibration Line is save in the Folder as Cal. Line Data
File.

９．Measuring the thickness/ counting rate
When the Measurement(M)－Thickness・Counting Rate(C) performs, Thickness・Counting Rate
Form opens.

! Caution
When other Measurement Forms are open, close them and open the Thickness・Counting
Rate Form.

9-1.Explanation of the Thickness・Counting Rate Form
③
④

②

①

⑤
⑥

① Data Table
It tables the measurement data.
12

② Control List
Conditions required for the measurement can be entered.
③ Folder Window
It shows the Folder which files the measurement data.
④ Calibration Line Window
It displays the Cal. Line Data File used for Calibration.
⑤

Menu BarIt changes the measurement and form.

⑤ Task Bar
It displays the current status and changes the form.

9-2.Calibration
The efficiency of the detector depends on the temperature, humidity and pressure. Therefore,“calibration” of the Calibration Line is required. The calibration performed at one
calibration point. A calibration sample is required for the calibration.

9-2-1. Setting the Calibration Conditions① Find the Cal. Line Data File which is going to use now from Calibration Line Window.
And double-click.
② Confirm the Calibration Line Name.
③ Enter the Thickness of Calibration Sample by angstrom (A) unit.
④ Enter the Measure Count. e.g.) 5⑤ Set the Counting Time. e.g.) 10⑥ Enter the Measure Energy. Measure Energy has to be the same value as Measure Energy ofCal. Line Data file. e.g.) 5.9⑦ When the Measure Energy changes, the Light Adjuster is automatically initialized.
⑧ Setting the UV Intensity. Firstly, enter the Target of UV Intensity Adjustment. Target
of UV Intensity Adjustment has to be the value between UV Intensity(Max) and UVIntensity(Min). e.g.) 10⑨ Choose the Measurement(M)-UV Intensity Adjustment(L) in Menu Bar. Automatic adjustmentof the UV Intensity automatically starts. When the adjustment is done, UV Intensity
becomes almost the same value as the Target. The back color turns green ±5％ of thetarget, yellow ±5～20% of the target and red ±20％ of the target.

13

9-2-2. Setting the Calibration Sample① Activate the Measurement(M)-Sample(S) in the Menu Bar.
② The message box that confirms the movement of the SAMPLE STAGE appears. Click YES(Y).
③ Confirm if the noise of the sample stage is gone.
④ Confirm that the message box which instructs to change the sample appears, and open the
SAMPLE DOOR.
⑤ SAMPLE DOOR opens.
⑥ Place the sample on the left-front of the SAMPLE STAGE.
⑦ Adjusting the height of the sample stage. Place the sample on the left-front of the SAMPLE
STAGE. Pull out the HEIGHT GAUGE and place it as if the sample is pressed with the SAMPLE
STAGE. And, revolve the HEIGHT HANDLE until the tip of the probe matches the height ofthe measuring part of the sample.

! WarningIf even any part of the sample is placed higher than the probe of the HEIGHT GAUGE,
the sample might hit the detector. As a result, the sample or the instrument
might break. Adjust the height appropriately.
⑧ Place the sample at the center of the SAMPLE STAGE and fix it by the SAMPLE CLIP.
⑨ Close the SAMPLE DOOR.
⑩ Confirm that the SAMPLE DOOR is closed. And click OK on the display.

9-2-3.Calibration① Activate the Measurement(M)－calibration(A).
② Once the calibration starts, the counting rate shows up on the measurement display.
③ After finishing the calibration, the calibration result appears in the message box. If
you want to perform the calibration based on the result, click Yes. If not, click No.

④ The Shift of Calibration Line is displayed on the Control List.

! Caution
The communication between the PC and the instrument might not be able to performdepending an OS if the AC-2 for Windows or another application is managed during
the communication. We recommend you do not allow the PC to manage other applications
during the communication.

14

9-2-4.Taking out the Calibration Sample① Choose the Measurement(M)-Sample(S) in Menu Bar.
② Confirm that message box displays and the noise of the sample stage disappears.
③ Open the SAMPLE DOOR.
④ SAMPLE DOOR opens.
⑤ Take out the sample.
⑥ Close the SAMPLE DOOR.
⑦ Confirm that the SAMPLE DOOR is closed. And, click OK on the display.

9-3.Setting the Measuring Conditions
Entering the measurement conditions from the Control List.
① Entering the sample name. The name entered here will be the name for Thickness/Counting
Rate Data File displayed in Data Manager Form. Click the right box next to the Sample Name,and enter the characters. e.g.) TEST 1, TEST 2, TEST 3 etc. When rewriting the sample namealready existed, press the space key after clicking.
② If the Folder Window is clicked, folders are displayed. Choose the folder to file theThickness/Counting Rate Data which is measured from now. e.g.) test
③ Enter the Measure Count. e.g.) 20④ Setting the Counting Time. e.g.）10⑤ UV Intensity has to be the same value as the one at calibration. Cal. Data File, calibration,
Measurement of thickness are taken place under the same UV Intensity.
⑥ Enter the Information such as about lot number about the measuring sample in Notes１.

9-4.Setting the Sample① Activate the Measurement(M)-Sample(S) in Menu Bar.
② A message box which confirms the movement of the SAMPLE STAGE displays. Click YES(Y).
③ Confirm that the noise of the sample stage disappears.
④ Confirm that a message box which instructs to change the sample. And, open the SAMPLE
DOOR.
⑤ SAMPLE DOOR opens.
⑥ Place the sample on the left-front.
⑦ Adjusting the height of the sample stage. Place the sample on the left-front of the SAMPLE
STAGE. Pull out the HEIGHT GAUGE and place it as if the sample is pressed with the SAMPLE
STAGE. And, revolve the HEIGHT HANDLE until the tip of the probe matches the height ofthe measuring part of the sample.

15

Warning
If even any part of the sample is placed higher than the probe of the HEIGHT GAUGE,
the sample might hit the detector. As a result, the sample or the instrument might
break. Adjust the height appropriately.

⑧ Fix the sample at the center of the SAMPLE STAGE by the SAMPLE CLIP.
⑨ Close the SAMPLE DOOR.
⑩ Confirm the SAMPLE DOOR closes, and click OK.

9-5.Measurement① When the Measurement(M)-Measurement(M) in Menu Bar is chosen, the measurement of thecounting rate and thickness starts.
② When the measurement starts, the data displays.
③ A message box which tells the ending of the measurement opens. Click OK. The measured
counting rate and thickness Data are saved in a Folder as Thickness･Counting Rate Data
File.

! Caution
The communication between the PC and the instrument might not be able to performdepending an OS if the AC-2 for Windows or another application is managed during
the communication. We recommend you do not allow the PC to manage other applications
during the communication.

9-6.Taking Out the Sample①

Choose the Measurement(M)-Sample(S)in Menu Bar.

②

Confirm that a message box appears and the noise of the sample stage disappears.

③

Open the SAMPLE DOOR.

④

SAMPLE DOOR opens.

＊NOTE
Measurement(M)-Measurement Cancel(G) can be suspended even during the measurement.
⑤

Take out the sample.

⑥

Close the SAMPLE DOOR.

⑦

Confirm that the SAMPLE DOOR closes. And, click OK.

16

9-7.Measuring the Next Sample
If the measurement is taken place under the same conditions, rewrite the sample name, change
the sample and start the measurement (following the 9-4 to 9-6.) If you change the Cal.
Line Data File, perform the calibration and re-set the conditions.

9-8.Anode Voltage,Initialize Light Adjuster
After starting up the instrument, if measurement takes a long time or measurement takes place
under the temperature/humidity change, re-set the Anode Voltage and perform the Initialize
Light Adjuster.
If the Measurement(M)－Anode Voltage(V) is activated, the Anode Voltage automatically
performs. It takes 5 minutes and a message box opens. Click OK.
If the Measurement(M)-Initialize Light Adjuster(I) is activated, the Initialize the Lightadjuster automatically starts. It takes 5 minutes and a message box opens. Click OK.

9-9.Finishing the Thickness･Counting Rate Form
While the Thickness･Counting Rate Form is active, finish the Thickness･Counting Rate Formby the File(F)－Close(X).

17

１０．Displaying the Data
Data Manager Form displays the Data File you want to open. Click the button ”Data Manager”
of Task Bar to display the Data Manager Form. Next, activate the Display(D)-Refresh Data(D).

10-1.Explanation of Data Manager Form
④

⑧
②

⑥
⑦
①

③

⑤

① TreeIt displays the Folder like a tree.
② Data Manager
It displays the Data File or folder.
③ List Table
It displays the explanation of the Data File.
④ Menu Bar
Printing, Deleting the Data File, Creating the Folder, Renaming⑤ Task Bar
It displays the folder and Data file currently chosen and changes the form.
⑥ Cal. Data File
⑦ Cal. Line Data File
⑧ Thickness･Counting Rate Data File18

10-2.Displaying the Data
① Open the Data File which you want to display on the Tree. e.g.) TEST. And, choose adata file by the Data Manager.

e.g.) TEST1, TEST2, TEST3, etc. Execute the File(F)－Open(O), and open the file.
② Open the Display Form.
③ Data can be copied by activating the Edit(E)-Copy(C). The data can be used in anotherapplication of WINDOWS.
④ When File(F)－Close(X) is executed, Display Form is closed. The Data is renewed when
the Display Form closes.

10-3.thickness
①

②

③

④

① Menu Bar
It copies the Data File.
② Data Table
It displays the measurement data as a table.
③ Control List
Conditions to draw Graph can be entered.
④ Task Bar
It displays the coordinates of the mouse pointer on the Graph Box, and changes the form.

1910-4.Cal. Line Data
①

②

④

⑤
⑥

① Menu Bar
It makes a copy of the Data File.
② Graph Box
It displays the Cal. Data File as a Graph. The vertical axis of the Graph indicates “Thickness”,
and horizontal axis indicates “LogCR of the counting rate”.
③ pop up menu
It is used to draw the Calibration Line. When the mouse pointer is on the Graph, it appears
by right-clicking.
④ Control List
Conditions to draw the Graph can be entered.
⑤ Data Table
It displays the measurement data as a table.
⑥ Task Bar
It displays the coordinates of the mouse pointer on the Graph Box, and changes the form.

2010-5.Cal. Data File
①

②

③

④

① Menu Bar
It makes the copy of Data File.
② Data Table
It displays the measurement data as a table.
③ Control List
Conditions to draw the Graph can be entered.
④ Task Bar
It displays the coordinates of the mouse pointer on the Graph Box, and changes the form.

21

１１．Printing① Choose the Data File which you want to print by the Data Manager. e.g.) TEST. Perform
it by managing the File(F)－Print(P).
② Then, the Print Setting Box displays. After setting the printing pages, click OK.
③ Print Preview Form displays.

④ After confirming the Graph to display, activate the Print(P)－Print(G).

! Caution
・ If you try to print the data directly from the data form, the most recent change
might not be recorded.
・ The data is printed by the printer which is designated by the OS as the usual
printer.

22

１２．Ending① Repeat the File(F)－Close(X), close

all the small forms such as measurement, DataManager, etc.
② Close the main information by the File(F)－Close(X).
③ Turn off the power sw. on the front pane of the LC1. And, turn the breaker off.
④ If the compressed air is supplied by a pump, turn the power off. If it’s supplied by
the tubing from the factory, shut the valve off.
⑤ If the water is in the MIST SEPARATOR, turn the DRAIN COCK (valve) to the right and release
the water. After releasing, shut the valve off.
⑥ Finish the Windows and turn off the personal computer, display and printer.

Drain Cock23

ＡＣ－２ Service Manual－Consumable parts replacement method－

Index
1. General ...........................................................................
2. Warning ...........................................................................
3. Caution ............................................................................
4. How to use this manual ............................................
5. Cable connection ........................................................
6. How to replace the detector .................................
7. How to replace the lamp .........................................
8. How to replacement optical fiber .........................
9. Maintenance of air supply piping .........................
10. Safety checks after maintenance .........................

1
1
1
2
2
2
5
7
9
10

1. General
This document describes the installation of AC-2 main unit and the maintenance /replacement procedures for consumables (the detector, lamp, and optical fiber and dry air

generator).

2. Warning
WARNING
Do not open the main unit cover while the unit is energized.
• High-voltage parts exist within the main unit; an electric shock may begenerated.
• Never look at the ultraviolet lamp while it is lighting up with naked eyes
because ultraviolet is being emitted from the lamp. Pain in the eyes and vision
disorder will be caused.
• Never apply ultraviolet directly on your skin. Skin inflammations will becaused.
• Never touch the ultraviolet lamp while it is lighting up or immediately after thelamp is turned off because it is hot.

3. Caution
This manual is described at following precondition.
1) AC-2 and Personal computer are installed in the correct way.
2) Windows software is installed correctly.
3) The operator understands the operation of Windows.

Caution•

Before doing the maintenance work, turn off the power and wait for 1 hour at least.
Because, even turning off the power, lamp and other parts may be still hot, and it
may injure the hands.

•

Before doing the maintenance work, close the valve of compressed air to the dry
air generator. And, open the drain cock to release the pressure.

•During the maintenance work, take the necessary protection tools such as eyes
glass, gloves long sleeve ware.

•

Take care the direction of polarity of lamp when installing.

•

Do not give any strong impact on the lamp.

•

Do not touch the lamp with hands. It may lose the life of the lamp.

•

Do not touch the edge of optical filter.

•

Please replace the MAINS supply cord if it is inadequate RATED cord.

1

It may be damaged and burst.

4. How to use this manual
Read this manual carefully to perform the maintenance or replacement of the spareparts (detector, lamp, optical filter and dry air generator) on AC-2. The replacement
frequency of the detector is depending upon the frequency of use, but ourrecommendation is 1year.
The detector part replaced can be sent to Riken Keiki for the overhaul.

5. Cable connection
Connect the cables in the order below.
(1) Connect LC1 and DC1 with the supplied power cable.
(2) Connect LC1 and DC1 with the supplied optical cable.
(3) Connect LC and PC with the supplied RS-232C cable.
(4) Connect the supplied power cable to LC1.

RS-232C cable

Air IN(0.5 - 0.6 MPa)

Power cable
Optical cable

LC1

DC1
Optical fiber

AC power cable

6. How to replace the detector
6-1 Replacement frequency
When the anode of the open counter which is the detector of AC-2 becomes dirty, it
makes the serious problem on the measurement.
So, if the condition, example, the PC shows [The trouble happens on the detector], low
detection efficiency, large noise or fluctuation of the measurement value, are found,replace the detector. The replacement frequency is depending upon the frequency ofuse, but the standard life time of the detector is 1 year.
The detector exchanged can be restored by performing overhaul, so if necessary, ask
Riken Keiki for overhaul.

26-2 Appearance and caution
Lock

Connectors view
Detector

Electron gate

Caution・The detector is supplied only from Riken Keiki・

Before doing the maintenance work, turn off the power switch at the rear sideof DC1 unit. If not, it may receive electrical shock.

・

Use protection tools like the long sleeve cloth and gloves.
Do not touch the electron gate.

・

6-3 How to replace the detector

6-3-1 Take off the existing detector.
1) Prepare the cover of detector, detector bag and detector case.

Detector Cover

Detector Bag

Detector Case

2) Open the detector maintenance door of AC-2 DC1 unit.
3) Take off the cables.

34) Release the rock.
5) Pull up the detector part and remove it.

Lock

The detector installed

All cables were removed

The detector was removed

to AC-2DC1 Part.

from the detector.

from AC-2DC1 Part.

6) Put the detector cover to the detector removed.

The Detector without the cover

The Detector with the cover7) Put the detector in to the detector bag, and keep it in the detector case.
6-3-2 Installation of new detector
1) Take the new detector from the detector bag and case.
(Keep the detector bag and case for next use)
2) Remove the detector cover.
3) Install the detector on AC-2DC1 unit.
4) Rock the detector unit.
5) Apply the cables.

47. How to replace the lamp
7-1 Replacement frequency
If the lamp is out of order or unstable, replace it. The standard life time forthe lamp is 1500 hours.
7-2 Appearance
Connector

UV window

D2 Lamp

Caution・

Before doing the maintenance work, turn off the power and wait for 1 hour atleast. Because, even turning off the power, lamp and other parts may be still
hot, and it may injure the hands.

・

Take care the installation detection of lamp and polarity.

・Do not give any high impact to the lamp.

It may be damaged or burst.

・ Use the eyes glass, long sleeve cloth glove for lamp replacement.
・ Do not touch the lamp by hands, the lamp may be damaged.
・ When turn on the lamp, install the lamp cover and close the lamp maintenancedoor absolutely.
・ When open the lamp maintenance door for the confirmation at powered

condition, use ultraviolet rays protection tools, long sleeve cloth gloves not to
get the ultraviolet rays.

5

7-3 Replacement of D2 lamp
1) Open the lamp maintenance door.
2) Release the lamp house lock, and remove it by pulling up the cover using handle.

Connector

Lock

Handle3) Take off the connector.
4) Loose the screws (3 each) at 5 turns by using the screwdriver.
5) Remove existing D2 lamp by rotating it.
6) Prepare the new lamp.
7) Install the new lamp, and tighten the guide screws.
8) Install the connector.

6

Guide screws

8. How to replacement optical fiber
8-1 Replacement frequency
When enough UV Intensity is not obtained, replace it. The replacement frequency isdepending on the frequency of use and level of UV Intensity used, the standard is 1
year.
8-2 Appearance
Guide pin

Attachment to DC1

Fiber top

Guide hole

Attachment to LC1
Optical Fiber

Guide crack
Guide pinLC1 optical fiber connector

DC1 optical fiber connector

Caution・ Before the replacement work, turn off the power switch at the rear side of DC1 unit.
・ When taking off the parts, use protection tools like long sleeve cloth, gloves.
・Do not touch of edge of optical fiber.

7

8-3 Replacement procedure
8-3-1 Remove existing optical fiber.
1) Keep the distance 25cm between AC-2DC1 unit and AC-2LC1 unit.
2) Remove the cover of optical fiber connector of AC-2DC1 unit.
Remove the screw cap, and pull out the optical fiber.

Screw cap

Cover3) Remove the cover of Optical fiber connector of AC-2LC1 unit.
Remove the screw cap, and pull out the optical fiber.

Screw cap

Cover

8-3-2 Installation of new optical fiber
1) Remove the cover of optical fiber at AC-2DC1 unit.
2) Insert the optical fiber into the Optical fiber connector of AC-2DC1 unit.
Install the screw cap.

At this time, guide pin must fit to the groove of guide.

3) Remove the cover of optical fiber at AC-2LC1 unit.
4) Insert the optical fiber into Optical fiber connector of AC-2LC1 unit, and fix it byfitting guide pin and guide groove with screw cap.

8

9. Maintenance of air supply piping
9-1 Maintenance frequency
The Mist separator and Micro mist separator must be maintained every 2 year or thepressure drops by 0.1 MPa.

In case of Dew point checker, it must be maintained every

2 year or if the color changes from green to other colors, it must be replaced.
The replacement frequency of membrane filter is every 4 years or if it loses the capacityof dehumidifier or the color of the Dew point checker turns to yellow, replace it.
9-2 Instruction of piping
It locates the right side of AC-2DC1, and it dry the compressed air supplied from therear of the unit, and finally it supplies the dry air to the detector.
a

b
a

a

b

c

a
f

Right side view of AC-2DC1edOpen the side door

a: Presser gaugeb: Dew point checker

c: Mist separator

d: Drain Cocke: Micro Mist separator

f: Membrane Air Dryer

Caution・ Before the maintenance work, turn off the power switch of rear side of DC1 unit
absolutely.
・ Close the compressed air valve to the dry air generator; open the drain cockto release the pressure, before the maintenance work.
・ Use the protective tools like long sleeve cloth and gloves.

99-3 Maintenance of piping
See individual instruction manual related.
1) Mist separator: AFM300 series (SMC Co.,Ltd.)
2) Micro mist separator: AFD2000 series (SMC Co.,Ltd.)
3) Membrane air dryer: IDG5H (SMC Co.,Ltd.)
4) Pressure meter : AR2001 series (SMC Co.,Ltd.)

10. Safety checks after maintenance10-1. Detector

No.
1
2
3
4
5
6

Item
Detector installation

Check detail
Check
The detector is installed properly.
It is locked.
Cable connection
The cables (three cables) are notdisconnected.
They are locked.
Tubing
The tubes are not disconnected.
AC-2 DC1 unit detector The screw for the AC-2 DC1 unit detector
maintenance door
maintenance door is tight.

10-2. Lamp
No
Item
1
Lamp installation
2
3
Connector connection
4Lamp cover5AC-2 LC1 unit lamp
maintenance door
10-3. Optical fiber
No
Item
1
Optical fiber installation
2
3
4
5

Cover

Check detail
The lamp is installed properly.
The screw is fixed.
The connector is not disconnected.
The lamp cover is installed.
The screw for the AC-2 LC1 unit lamp
maintenance door is tight.

Check

Check detailCheck
The optical fiber is installed properly at the LC
side and DC side.
It is not bent.
It is through the guide rail.
The cap screw is fixed.
The cover is installed.

10