Adding measurement
accuracy to X-raymicroscopy.

Metrology Extension
for ZEISS Xradia Versa

www.zeiss.com/xrayReveal smallest
dimensions.
Measure them mostaccurately.
Miniaturization and integration of components
drive growing demand for high-resolution
metrology. ZEISS introduced an entirely new realmof non-destructive insights into submicron details
with Xradia Versa X-ray microscopes. Now, with
Metrology Extension for your ZEISS Xradia
620/520 Versa, you can add measurement withan accuracy far beyond the limits of conventional
CT technology.
Benefit from high-resolution X-ray imaging
combined with high-precision metrology.
Get verified measurement accuracy of small
dimensions in reconstructed volumes of lessthan 125 mm3.

Small volumes at high resolution

Simple calibration workflow

Leading CT metrology accuracy

Unlike conventional Micro-CT solutions,

The MTX package provides an integra-

Calibrated with MTX, ZEISS Xradia

ZEISS Xradia Versa provides high-resoluti-

ted user-guided calibration workflow,

Versa systems provide a market-leadingon imaging of small volumes inside larger

turning the resolution capability of yoursamples, even when performing in-situ

Versa system into verified measurement

maximum permissible error (MPE) value of
MPESD = (1.9 + L/100) μm for measure-and 4D investigations. The MTX package

accuracy. Once the calibration routine has

ments in small-scale volumes, where L

compliments this offering by enabling

been executed, you can perform precise

is the measured length in mm, opening

measurements at high dimensional accu-

measurements and make the data availa-

new fields of application with the need forracy within small reconstructed volumes

ble to standard metrology software forhigh-precision metrology performance inof 125 mm .

further processing.

manufacturing and research.

3• Now add high accuracy to your highresolution, high precision Versa systems.
• Perform high-resolution CT metrology withthe best MPE specifications offered.
• Enhance confidence in your measurements
needed for quality assurance.
• XRM Check phantom enables seamlesscalibration and accuracy verification.
• XRM Check developed in accordance with
the VDI/VDE 2630-1.3 guideline.

XRM Check: ZEISS has developed a (multi-sphere) length
standard for verifying the accuracy of the CT measurementsof small-scale dimensions.

Move the limits ofyour applications.
Deliver traceable results.

Smartphone camera lens assembly
In the assembled state of smartphone camera lens modules,
the assessment of geometrical properties requires a non-contact
and non-destructive measurement method to quantify relationalparameters. Metrology Extension for ZEISS Xradia Versa allows
the accuracy-verified measurement of properties likeTip of a fuel injector nozzle

Plastic injection-molded connector

Since geometric features of injector nozzles influenceDimensional measurements of both internal and externalengine performance, deviations from nominal nozzle

structures of small plastic injection-molded parts or easy-

design are typically measured for quality control.

to-deform components help to determine deviations from

X-ray CT is uniquely suited for non-the nominal geometries specified in the computer-aided

destructive dimensional measurement.

design (CAD).

• thickness of annular wedges,• centration interlock diameters,• gaps between wedges,• lens-to-lens tilt,• apex heights and centration,
which are important for functional inspection and theenhancement of manufacturing designs and processes, toenable the production of versatile cameras with improved
cell phone image quality.

45Specifications
ZEISS Metrology Extension for
ZEISS Xradia 620/520 Versa

Accuracy (MPE complies with VDI/VDE part 1.3)
SD (TS) in μm

1.9 + L/100 (1,2)

Measuring range

Max measuring length: 4.8 mm (3)SoftwareOperating Software

Scout-and-Scan Control System for ZEISS Xradia Versa

Operating System

Microsoft Windows 10

Further data processing

ZEISS CALYPSO

Calibration standard

XRM Check used for determining sphere-center-distance(SD) errors as per VDI/VDE 2630 -1.3 guideline

Spheres

22 ruby spheres (grade 5) with 300 µm diameter

Sphere distances

Total of 35 different sphere distances measured along
5 different lengths in 7 different planes;
Largest distance measurement of 3.6 mm

Supporting structure

Made of fused silica(coefficient of thermal expansion ≈ 0.55 x 10 -6 /K)

Calibration uncertainty

Reference calibration data with an uncertainty ofU (k=2) < 0,150 µm.

Availability
New system compatibility

ZEISS Xradia 620 Versa

Field upgrade compatibility

ZEISS Xradia 620 Versa
ZEISS Xradia 520 Versa

L is the measured length in mm
A ccuracy specifications valid for measurement in a single field of view on the 4X optical magnification3
S amples could be longer than 4.8 mm as long as region of interest for CT reconstruction fits inside the field of view
1
2

Carl Zeiss Microscopy GmbH07745 Jena, Germany
microscopy@zeiss.com

EN_60_020_0044I Printed in Germany CZ-VIII/2020
Subject to change in design and scope of delivery and as a result of ongoing technical development.

XRM Check