AB

Aiming at a BreakthroughEstablishment of Division of Silicon Technology
Takeo Hattori
Former Chief, Division of Silicon Technology
The Japan Society of Applied Physics
E-mail : hattori@ipc.musashi-tech.ac.jp

This report introduces the Division of Silicon Technology (URL: http://si.tuat.ac.jp, email: secretariat@si.tuat.ac.jp), which was established twoyears ago as a central site for research activities focusing on siliconbased integrated circuit technology. Prior to that, the divisions in theJapan Society of Applied Physics were: Optics, Radiation Science, Solid
State Physics and Applications, Thin Film and Surface Physics, Materials
Science and Crystal Technology, Education in Applied Physics, Organic
Molecular Electronics and Bioelectronics, Superconductors, and Plasma
Electronics. These divisions individually selected and worked on relevant
topics of silicon-based integrated circuit technology such as devices,processes, and materials. There was concern, however, that this approach would soon cease to work in the field of microfabrication ofsilicon-based integrated circuits. To explore a breakthrough, the Professional Group was newly organized three years ago in the Japan Society of Applied Physics, aiming at a comprehensive coordinated approach in the study of devices, processes, and materials related to silicon-based integrated circuits. After one year, the Professional Groupwas promoted to the Division of Silicon Technology as its membershiprapidly grew. Initially, the Division consisted of the Lithography Committee, ULSI Device Committee, Silicon New Function Device Committee, Surface/Interface/Silicon Material Committee, and Multi-Level Interconnect System Committee. Since then, the Division of Silicon Technology has been actively promoting various research activities, and has
continued to grow, with the Simulation and Modeling Committee being added in April 2000 and the Junction Technology and SiliconNanotechnology Committees being added in September 2000. As ofFebruary 10, 2001, the Division of Silicon Technology was the thirdlargest division in the Japan Society of Applied Physics, having a total of671 members.
The Division of Silicon Technology organized and implemented
various research activities in FY2000. Each of the eight Committees
held its own research meeting. Also, two Committees jointly organized
two research meetings. Miniature versions of the Spring and Fall Meetings were held twice, and these were open to members of the Division.
Together with the ADMETA Committee, the Division of Silicon Technology organized Advanced Metallization Conference 2000: Asian Session on October 19 and 20, 2000 (with 44 papers presented and 118
participants). The Division of Silicon Technology held the first international workshop on junction technology in Asia on December 6, 2000
(with nine papers presented and 152 participants). The Division of Thin
Film and Surface Physics and the Division of Silicon Technology jointlyorganized the sixth research meeting to discuss the formation, charac-terization, and reliability of ultrathin silicon oxide films on January 26 and 27,
2001 (with 64 papers presented and 155
participants).
Innovation in silicon-based integrated circuit technology has dramatically improved computer performance. High-speed information
processing achieved by advanced computer technology, when combinedwith communication technology, has significantly stimulated the worldwide exchange of information. This change has opened up a new eraof global civilization in which politics, economics, education, and culture influence each other across the world.
There are, however, some problems in silicon-based integrated circuit technology. Specifically, the lifetime of silicon-based integratedcircuits is as short as ten years. Moreover, the effective lifetime is much
shorter because integrated circuits of a given performance quickly become obsolete due to the rapid progress of technological innovation.
As a result, an increasing number of electronic devices with embedded
integrated circuits, such as computers, home appliances, and cellularphones, are becoming an unwanted legacy for future generations.
In Japanese culture, an important role is played by trees, whosecharacteristics have been studied to find their optimum use. Horyuji
Temple in Nara, which is the world’s oldest wooden structure, was constructed 1300 years ago and it has been registered as a UNESCO World
Heritage site. It uses 2000-year-old Japanese cypress. The constructionengineers who built Horyuji Temple inherited knowledge about tree
lifetimes and techniques for building high-durability structures that had
been handed down from one generation to another for 2000 years.
Ancient engineers spent their whole lives orally handing down theirknowledge and technology in order to build supreme structures thatthey could be proud of throughout history.
In order for humans to maintain prosperity for a long period oftime, we must replace our conventional resource-wasting industry witha new resource-saving industry that focuses on reusing resources andwe must manufacture electronic equipment that will remain valid andusable for generations to come. To do this, we must develop designconcepts that enable products to evolve by incorporating new technologies and introducing an element of recyclability into the design ofproducts and parts.

JSAP International No.4 (July 2001)

JSAPI̲Vol4.p65

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