Gemini™ MxG5xx ATM to Ultra-High VacuumGauge

The INFICON Gemini™ Inverted Magnetron Vacuum Gauge is theworkhorse for all vacuum measurement applications. While Gemini
MPG50x combines two sensor systems in one small device to measurefrom atmosphere down to 1x10– 9 mbar, the Gemini MAG50x is a purecold cathode sensor System (without Pirani element) which covers therange from 1x10-2 mbar to 1x10– 9 mbar. The patented ultra-low
magnetic stray field design opens up a whole new range of applications.
A unique interchangeable dual chamber sensor unit avoids cleaning
cycles and reduces maintenance, making Gemini the most robust andeconomical vacuum gauge of its kind.
Gemini Cold Cathode and combination comes with fully integrated
digital electronics, providing ultimate flexibility for system integration.
The Cold cathode and Pirani combination version (MPG) option
provides seamless transition, reliability, practicality and flexibility acrosswide ranging applications.
MAG and MPG Gemini are now available with EtherCAT fieldbus andsetpoints as MAG55x and MPG55x.
For corrosive applications we suggest to use the ceramic coatedversion MxG5x4. Feedthrough and Pirani inside the sensor head are
fully ceramic coated for enhanced corrosion resistance.
Gemini™ Cold Cathode and combination sensor`s come with fully
integrated digital electronics, providing ultimate flexibility for SystemIntegration.
Both, cold cathode and Pirani combination sensor Option provide
seamless Transition, reliability, proactivity and flexibility across wide
ranging applications.

1Gemini™ MxG5xx ATM to Ultra-High Vacuum Gauge

ADVANTAGESnLong lifetime in harsh environments
nLow magnetic stray fieldn

Reliable fast ignition
nFastest maintenance - replaceable insert

nCompact size - easy to integratenCorrosion proof feed-through & sensor elementnSelectable measuring currentn

2 relay setpoints (MxG55x)n

EtherCAT and RS232/ RS485 digital interace

2Gemini™ MxG5xx ATM to Ultra-High Vacuum Gauge

ORDER INFORMATION

3Gemini™ MxG5xx ATM to Ultra-High Vacuum Gauge

SPECIFICATIONS
Type
Measurement system

MAG5xx

MPG5xxCold cathode ionization
measurement system(according to the inverted
magnetron principle)

Pirani and cold cathodeionization measurement
system (according to theinverted magnetron principle)

Measurement range (air, N2)

mbar

1×10⁻⁹ … 1×10⁻²

1×10⁻⁹ … 1000

Measurement range (air, N2)

Torr(7.6×10⁻¹⁰ … 7.6×10⁻³)(7.6×10⁻¹⁰ … 760)

Accuracy (N2)
1×10-8 … 1×10-2 mbar

% of reading30-

1×10-2 … 100 mbar

% of reading-

30

100 … 1000 mbar

% of reading-50

1×10-8 … 1×10-2 mbar

% of reading

5-

1×10-8 … 100 mbar

% of reading

-

5any

any

10 (limited to inert gases<55°C)

10 (limited to inert gases<55°C)

Repeatability (N2)Mounting orientation
Admissable pressurebar (absolute)

Admissible temperature
Operation (ambient)°C+5 ... +55+5 ... +55

Bakeout at flange (1)

°C

<150

<150Storage°C-40 ... +70-40 ... +70

Filament temperature

°C

-120

1×10-7 … 1×10-2 mbar%

<95 (non-condensing)<95 (non-condensing)

1×10-8 … 1×10-2 mbar%

<70 (non-condensing)<70 (non-condensing)+14.5 ... +30+14.5 ... +30

<1

<1W

<2<2AT<1<1

Relative humidity for 30 days ayear

Supply voltage
At gauge (2)V (dc)

Supply voltage
RippleV (p-p)Supply voltage
Power consumption
Supply voltage
Fuse to be connected

4Gemini™ MxG5xx ATM to Ultra-High Vacuum Gauge

SPECIFICATIONSTypeMAG5xx

MPG5xx0 ... +10.50 ... +10.5

Voltage range
analog output

V

Error signal
Output impendanceΩ2x10

Error signal
Load impendancekΩ>10 (short circuit-proof)

Step response timep > 1 x 10-6 mbar

ms
<100

Step response time
p=1x10-6...1x10-8 mbar

s~1Gauge identificationkΩ

85

3MAx-00x-0x0N

V-

3MBx-00x-0x0P

V+1.398 ... +8.598

3MAx-00x-0x0Q

V-

3MAx-xxx-xxxN

V+1.5 ... +8.5

3MBx-xxx-xxxP

V-

3MAx-xxx-xxxQ

V+0.667 ... +10

Measurement range

Status (pin 6)
Cold cathode ignited

V-Pirani-only mode

V0 (low)

Combined Pirani/ cold cathode Vmode 3)+15 ... +30 (high)Operating voltagekV<3.3High operating current

µA

<500

Voltage vs. pressure
3MAx-00x-0x0N

volts per decade-3MBx-00x-0x0P

volts per decade

0.6 (logarithmic)

3MAx-00x-0x0Q

volts per decade-3MAx-xxx-xxxN

volts per decade

1 (logarithmic)

3MBx-xxx-xxxP

volts per decade-3MAx-xxx-xxxQ

volts per decade1.33 (logaritmic)

5Gemini™ MxG5xx ATM to Ultra-High Vacuum Gauge

SPECIFICATIONSTypeMAG5xx

Low operating currentµA

MPG5xx<100Weight
DN 25 ISO-KF

g<280

DN 40 ISO-KF

g

<320

DN 40 CF-F & CF-R

g

<570

Error signal
Error signal

V
09.5 ... +10.5

3MAx-xxx-xxxN

V<+0.53MA-xxx-xxxQ

V<+0.33MBx-xxx-xxxP

V-Output impedanceΩ
2 x 4.7 (short circuit-proof)

Standards
CE conformity
EMC (EN 61000-6-2, EN61000-6-3), EN 61010-1 &RoHS
Load impedancekΩ>10 (short circuit-proof)

Maintenancenone

Step response time (pressuredependent)
p > 1 x 10-6 mbar

ms
<100

Step response time (pressuredependent)
p = 1x10-6...1x10-8 mbar

s~1Gauge identification (FCCconnector gauges)
3MAx-0xx-000NkΩ-

3MAx-0xx-000Q

kΩ

100

3MBx-0xx-000PkΩ-6Gemini™ MxG5xx ATM to Ultra-High Vacuum Gauge

SPECIFICATIONSTypeMAG5xx

MPG5xxStatus signal, digital output(FCC connector)
Current ratingmA

100

High Voltage is ON

V (dc)+14.5 ... +30 (depending on
supply voltage)

High Voltage is OFF

V (dc)

0

Status signal, digital output(FCC connector)

Status signal, digital output (Dsub connector)
Supply voltage

V (dc)<30

High voltage ON

V (dc)
0

Status signal, digital output (Dsub connector)
Current ratingmA

100 (sink)Status signal, digital output (Dsub connector)
High voltage OFF

open

Electrical connection
3Mxx-00x-000x

FCC68, 8-pin, female

3Mxx-00x-010x

D-sub, 9-pin, male

3Mxx-0xx-000x

FCC68, 8-pin, female

3Mxx-0xx-010x

D-sub, 9-pin, male

3Mxx-0xx-04xx

D-Sub HD, 15-pin, male (forRS232/485 version)

3Mxx-xxx-x2Gx

D-Sub HD, 15-pin, male (forEtherCAT Version)

Sensor cable
3Mxx-00x-000x

8-pin, shielded

3Mxx-0xx-000x

8-pin, shielded

3Mxx-0xx-010x

9-pin, shielded

3Mxx-0xx-04xx
15-pin, shielded (forRS232/485 version)

7Gemini™ MxG5xx ATM to Ultra-High Vacuum Gauge

SPECIFICATIONSTypeMAG5xx

3Mxx-xxx-x2Gx

MPG5xx15-pin, shielded (forEtherCAT version)

Cable lenght
50 m cablem< 50 (8x0.14 mm²)

75 m cablem< 75 (8x0.25 mm²)

100 m cablem< 100 (8x0.34 mm²)

300 m cablem< 300 (8x1.00 mm²)

FCC connector cablem<50 (0.14 mm²/ conductor)

High voltage (in the measuringchamber)
Ignition voltage

kV

<4.5

Operating voltage

kV

<3.3

High current

µA

<380

Low currentµA<130Current (in the measuringchamber)

Setpoint relays (MxG55x)
Range (N2)mbar bar

5x10₋₅ ... 1500

Setpoint relays (MxG55x)
Relay contact

normally open (NO), potential
free

Setpoint relays (MxG55x)
Hysteresis% of threshold

10

Setpoint relays (MxG55x)
Contact rating of mechanicalrelays

V/A<30/ <1ms<30

Setpoint relays (MxG55x)
Switching time
Materials exposed to vacuum
3Mx0-00x-0x0x

W, Ni alloy, AI₂O₃, glass,stainless steels

3Mx3-00x-0x0x

Ni alloy, AI₂O₃, stainlesssteels

3Mx0-xxx-xxxx

8Gemini™ MxG5xx ATM to Ultra-High Vacuum Gauge

Ni alloy, Mo, AI₂O₃, glass,stainless steels

SPECIFICATIONSTypeMAG5xx

3Mx3-xxx-xxxx

Mo, AI₂O₃, stainless steels3Mx0-11x-xxxx

Ni alloy, Mo, Al₂O₃, glass, Ti,stainless steels

3Mx3-11x-xxxx

Mo, Al₂O₃, Ti, stainless steels

Internal volume

MPG5xx22.8

DN 25 ISO-KF

cm³~19.9

DN 40 ISO-KF

cm³~20.9

DN 40 CF-F

cm³~25.2

DN 40 CF-R

cm³~25.6

cm³

22.8

22.8

Weight (MxG50x)
DN 25 ISO-KF

g<280

DN 40 ISO-KF

g

<320

DN 40 CF-F & CF-R

g

<570

DN 25 ISO-KF

g

<500

DN 40 ISO-KF

g

<320

DN 40 CF-F & CF-R

g

<780

Weight (MxG55x)

Degree of protection

IP 40

CE conformityEMC

2014/30/EU, EN 61000-6-2,EN 61000-6-3, EN 61326-1

RoHS

2011/65/EU

SafetyEN 61010-1

RS232C / 485C (MxG50x)
Baud rates

kBaud

9.6/ 19.2/ 38.4/ 57.6

RS232C / 485C (MxG50x)
Address

2 switches (address 00 - 255)

Digital functions

Read pressure, select Units:Torr, mbar, Pa, micron,counts. Monitor gauge Status,
detailed Alarm and warning
Information, safe state allows
Definition of behaviour incase of error.

9Gemini™ MxG5xx ATM to Ultra-High Vacuum Gauge

IP 40

SPECIFICATIONSTypeMAG5xx

Connector for RS232 & RS485D-Sub HD, 15-pin, male

EtherCAT® (MxG55x)
ProtocolEtherCAT?????

Communication standard
ETG.5003.1 S (R) V1.1.0 ⁴⁾
ETG.5003.2080 S (R) V1.3.0⁵⁾
Node address

Explicit Device Identification

Physical layer

100Base-Tx (IEEE 802.3)

Digital functions

Read pressure, select Units:Torr, mbar, Pa, micron,Counts. Monitor gauge
Status, detailed Alarm andwarning Information, safe
state allows Definition ofbehaviour in case of error.

EtherCAT connector

2 x RJ45, 8-pin (socket),
Input & output

EtherCAT cableSpecial Ethernet Patch cableor crossover cable, shielded(CAT5e Quality or higher)

EtherCAT® (MxG55x)
Cable lenghtm (ft.)

1) Without electronics.
2) The minimum voltage of the supply unit must be
increased proportionally to the length of the sensor cable.
3) Cold cathode ignited.
4) Semiconductor Device Profile5) Specific Device Profile: Vacuum Pressure Gauge

10Gemini™ MxG5xx ATM to Ultra-High Vacuum Gauge<100 (330)

MPG5xxSPAREPARTS
MAG5xx

MPG5xxMAG500 spare sensor, 25KF, SS351-500-MAG500 spare sensor, 25KF, TI

351-502-MAG500 spare sensor, 40CF-F, SS351-524-

MAG500 spare sensor, 40CF-F, TI

351-526-

MAG500 spare sensor, 40CF-R, SS

351-536-

MAG500 spare sensor, 40CF-R, TI

351-538-

MAG500 spare sensor, 40KF, SS

351-512-MAG500 spare sensor, 40KF, TI

351-514-MAG504 Ersatzsensor, 25KF, TI

351-503-

MAG504 spare sensor, 25KF, SS

351-501-

MAG504 spare sensor, 40CF-F, SS

351-525-

MAG504 spare sensor, 40CF-F, TI

351-527-MAG504 spare sensor, 40CF-R, SS

351-537-MAG504 spare sensor, 40CF-R, TI

351-539-MAG504 spare sensor, 40KF, SS351-513-MAG504 spare sensor, 40KF, TI

351-515-

MPG500 spare sensor, 25KF, SS-351-506

MPG500 spare sensor, 25KF, TI-351-508

MPG500 spare sensor, 40CF-F, SS-351-530

MPG500 spare sensor, 40CF-F, TI-351-532

MPG500 spare sensor, 40CF-R, SS-

351-542

MPG500 spare sensor, 40CF-R, TI-351-544

MPG500 spare sensor, 40KF, SS-351-518

MPG500 spare sensor, 40KF, TI-351-520

MPG504 spare sensor, 25KF, SS-351-507

MPG504 spare sensor, 25KF, TI-351-509

MPG504 spare sensor, 40CF-F, SS-

351-531

MPG504 spare sensor, 40CF-F, TI-351-533

MPG504 spare sensor, 40CF-R, SS-

351-543

MPG504 spare sensor, 40CF-R, TI-351-545

MPG504 spare sensor, 40KF, SS-

351-519

MPG504 spare sensor, 40KF, TI-351-521

MxG40x/50x Spare parts ignition aid (10)351-995351-995

Spare ion chamber ss

351-555351-555

Spare ion chamber ti

351-556351-556

11Gemini™ MxG5xx ATM to Ultra-High Vacuum Gauge

ACCESSORIES
MAG5xx

MPG5xxBaffle for BPG400

353-512353-512Centering ring with baffle DN 25 KF

211-113211-113

Centering ring with fine filter DN 25 KF

211-098

211-098

MxG50x Ignition tool set

351-550

351-550

DIMENSIONS

www.inficon.com

reachus@inficon.com

Due to our continuing program of product improvements, specifications are subject to change without notice.
RateWatcher is a trademark of INFICON. All other trademarks are the property of their respective owners.
09.08.2016=> Accuracy
MPG at 1x102 ...10mbar
from 15 to(2019-02)© 2019 INFICON