nano Motion TechnologySingle-Axis Linear Direct-Drive
Nanopositioning Stages
Nanometer-level performance in a large travelformat
High resolution (1 nm), repeatability (75 nm),and accuracy (250 nm)
In-position stability of <1 nm
Anti-creep crossed-roller bearings
High dynamic performance

Introduction

Flexible System Design

Aerotech’s ANT95 series stages are the world’s first
nanometer-level positioning systems with greater than 25 mmtravel. The ANT95L and ANT95L-PLUS crossed-roller stages
are the best-in-class in combining speed, accuracy, resolution,repeatability, reliability, and size, and are offered in twoaccuracy grades. As an evolution of the ANT stage family,
these linear stages exhibit enhanced motion performance overAerotech’s first generation ANT series. Product improvements
such as 5 g acceleration, 500 mm/s velocity, enhanced load
capacity, and standardized, universal base mounting patterns
allow the use of this flexible stage family in an even wider
range of configurations than its predecessors.

The ANT95L family has universal mounting and tabletop
patterns that allow for easy system integration. Two, three, ormore axes can be easily combined for flexible system designs
and multi-axis configurations.

System Characteristics
Outstanding accuracy, position repeatability, and in-position
stability require high system resolution. The ANT95-L stage’s
industry-leading 1 nm minimum incremental step size provides
this high level of performance. Aerotech’s direct-drive
technology has no hysteresis or backlash, enabling accurate
and repeatable nanometer-scale motion.

Noncontact Direct-Drive
All of the original ANT series’ direct-drive advantages havebeen preserved in the ANT95-L family. Only noncontact
direct-drive technology offers the robust, accurate, and highspeed positioning necessary for mass production of precision
devices. ANT95-L stages utilize advanced direct-drive
technology pioneered by Aerotech to achieve the highest
level of positioning performance. This direct-drive technology
is high-performance, non-cogging, noncontact, high-speed,high-resolution, and high-accuracy. This unique drive andbearing combination, packaged in an extremely small-profileand footprint, offers tangible advantages in many applications
such as high-precision positioning, disk-drive fabrication, fiberalignment, optical delay element actuation, sensor testing, andscanning processes that demand smooth and precise motion.

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111098Position (nm)NANO Technology
ANT95L Series

ANT95L

76543210105101520Time (s)2530

ANT95L 1 nm step plot. Best-in-class resolution and exceptional inposition stability for large travel stages.

Mechanical Specifications
Accuracy(1)ANT95L-050
50 mm

Base Performance±2.5 µm (±100 µin)±2.5 µm (±100 µin)

Plus Performance±250 nm (±10 µin)±250 nm (±10 µin)

Resolution (Minimum Incremental Motion)
Repeatability(Bidirectional)(1)

ANT95L-025
25 mm

TravelBase Performance
Plus Performance

1 nm (0.04 µin)

1 nm (0.04 µin)±100 nm (±4 µin)±100 nm (±4 µin)
±75 nm (±3 µin)
±25 nm (±1 µin)

Straightness(1)±1.0 µm (±40 µin)±1.0 µm (±40 µin)

Flatness(1)±1.0 µm (±40 µin)±1.0 µm (±40 µin)

Pitch

10 arc sec

10 arc sec

Roll

10 arc sec

10 arc sec

Yaw

5 arc sec

5 arc sec

500 mm/s (20 in/s)

500 mm/s (20 in/s)

5 g - 50 m/s2 (No Load)

4 g - 40 m/s2 (No Load)

Maximum Speed
Maximum Acceleration

See graph for typical performance

Speed Stability

See graph for typical performance

Settling Time
In-Position Stability(2)<1 nm (<0.04 µin)

<1 nm (<0.04 µin)7.75 N

9.5 N

Horizontal

5.0 kg (11 lb)

7.0 kg (15.4 lb)

Side

5.0 kg (11 lb)

5.0 kg (11 lb)

Moving Mass

0.46 kg (1.0 lb)

0.52 kg (1.4 lb)

Stage Mass

0.8 kg (1.8 lb)

1.2 kg (2.7 lb)

Maximum Force (Continuous)
Load Capacity(3)Material

Aluminum Body/Black Hardcoat Finish
30,000 Hours

MTBF (Mean Time Between Failure)Notes:
1. Certified with each stage.
2. In-Position Jitter listing is 3V value.
3. Axis orientation for on-axis loading is listed.
4. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis
or non-standard applications.
5. -PLUS requires the use of an Aerotech controller.

Mechanical Specifications
Accuracy(1)ANT95L-100
100 mmBase Performance±4.0 μm (±160 μin)±5.0 μm (±200 μin)

Plus Performance±275 nm (±11 μin)±275 nm (±11 μin)

1 nm (0.04 µin)

1 nm (0.04 µin)

Base Performance±100 nm (±4 µin)±100 nm (±4 µin)

Plus Performance±75 nm (±3 µin)

±75 nm (±3 µin)

Resolution (Minimum Incremental Motion)
Repeatability(1)(Bidirectional)

ANT95L-075
75 mm

TravelRepeatability (Unidirectional)(1)±25 nm (±1 µin)

±25 nm (±1 µin)

Straightness(1)±2.0 µm (±80 µin)±2.5 µm (±100 µin)

Flatness(1)±2.0 µm (±80 µin)±2.5 µm (±100 µin)

Pitch

10 arc sec

10 arc sec

Roll

10 arc sec

10 arc sec

Yaw

5 arc sec

5 arc sec

500 mm/s (20 in/s)

500 mm/s (20 in/s)

Maximum Speed
Maximum Acceleration

See graph for typical performance
See graph for typical performance

Settling Time
In-Position Stability(2)<1 nm (<0.04 µin)

Maximum Force (Continuous)
Load Capacity(3)3 g - 30 m/s2 (No Load)

3 g - 30 m/s2 (No Load)

Speed Stability

Horizontal<1 nm (<0.04 µin)

9.5 N

12.9 N

7.0 kg (15.4 lb)

7.0 kg (15.4 lb)

5.0 kg (11 lb)

5.0 kg (11 lb)

Moving Mass

0.72 kg (1.6 lb)

0.91 kg (2.0 lb)

Stage Mass

1.64 kg (3.6 lb)

2.1 kg (4.6 lb)

SideMaterial
MTBF (Mean Time Between Failure)

Aluminum Body/Black Hardcoat Finish
30,000 Hours

Notes:
1. Certified with each stage.
2. In-Position Jitter listing is 3V value.
3. Axis orientation for on-axis loading is listed.
4. Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis
or non-standard applications.
5. -PLUS requires the use of an Aerotech controller.

ANT95L Series±75 nm (±3 µin)
±25 nm (±1 µin)

Repeatability (Unidirectional)(1)

NANO Technology

ANT95-L Series SPECIFICATIONSNANO Technology
ANT95L Series

ANT95L Series SPECIFICATIONSElectrical Specifications

ANT95L

Drive System

Brushless Linear Servomotor

Feedback

Noncontact Linear Encoder±40 VDC

Maximum Bus Voltage
Limit Switches

5 V, Normally Closed

Home Switch

Near Center

Recommended Controller

ANT95L

A3200

Npaq-MXR
Npaq MR-MXH
Ndrive ML-MXH

Ensemble

Epaq-MXH
Epaq MR-MXH
Ensemble ML-MXH

Soloist

Soloist ML-MXH

Multi-Axis

Single Axis

Notes:
1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within
0.25ºC/24 hours. If this is not possible, alternate products are available. Please consult Aerotech Application Engineering for more information.

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80

100.1560
Position Error (nm)

100

100.2

100.1
100.05
100
99.95
99.9

¬ 178 ms Move and Settle

20020
40

99.8

80

99.75
20100
1510505Position (mm)1015020

ANT95L-050PLUS velocity performance at 100 mm/s and 1 kg
payload. Excellent speed stability is another feature of the ANT
series stages.

1000400750
Straightness Error (nm)2001000100200300

100200300 400 500 600
Move Time (ms)

700

800

ANT95L-050PLUS step and settle performance at full travel and 1kg payload. Outstanding settling time enhances throughput of mostapplications.

500

300
Position Error (nm)

4060

99.85

500
2500250
500
750

400
500

1000
1050
Position (mm)510

ANT95L-025PLUS accuracy and repeatability. This multiple test
run over an extended period of time shows the high level of systemaccuracy and repeatability.

7654321012345671020

100Position (mm)1020

ANT95L-050PLUS yaw, five runs, bi-directional. Highly repeatable,
minimal yaw error enhances system positioning accuracy.

50Position (mm)510

ANT95L-025PLUS straightness error, five runs, bi-directional.
Exceptional and highly repeatable – five times more accurate than
the stated specification.

Pitch (arc-sec)

Yaw (arc-sec)

Step Size: 50 mm
Speed: 500 mm/sSettle Spec: ±20 nm

76543210123456720100Position (mm)1020

ANT95L-050PLUS pitch, five runs, bi-directional. Excellent
repeatability/accuracy contribute to improved processing.

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ANT95L Series

Velocity (mm/s)

100.25NANO Technology

ANT95L/ANT95L-PLUS Series PERFORMANCENANO Technology
ANT95L Series

ANT95L-025 DIMENSIONS
ANT95L-025
DOWEL PIN MOUNTING
4.008-4.031
4.0
2X

37.5
TYP

102.3
25.0
TYP
50.0

UNDERSIDE DOWELPIN MOUNTING
4.008-4.031
7.0

CUSTOMER MOUNTING
4.0 [.16]
13X M4x0.7

25.0 TYP
37.5 TYP
47.0

94.0

14.0
1/2 HARD STOPTRAVEL

100.0

14.0
1/2 HARD STOPTRAVEL
13.0
1/2 LIMITTRAVEL

12.5
1/2 NOMINALTRAVEL

33.0
TYP 2.5

10.0
22.5

50.0
75.0
95.0

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25.0
12.5
STAGE MOUNTING
4X
4.50 THRU(CLEARANCE FOR M4 SHCS)

50.0
75.0
115.0

STAGE MOUNTING
4X M6x1.0
10.0

NANO Technology

ANT95L-050 DIMENSIONS
ANT95L-050

DOWEL PIN MOUNTING
4.008-4.031
2X
4.0

ANT95L Series

UNDERSIDE DOWELPIN MOUNTING
4.008-4.031
7.0
25.0 TYP
144.1TYP
37.5

TYP
50.0

TYP
62.5 70.9

CUSTOMER MOUNTING
5.0
23X M4x0.7

TYP 25.0

TYP 37.5

28.0
1/2 HARD STOPTRAVEL

47.0

28.0
1/2 HARD STOPTRAVEL
141.8

25.0
1/2 NOMINALTRAVEL

94.0

33.0

26.0
1/2 LIMITTRAVELTYP 2.5

10.0
22.5

50.0
20.9

100.0

STAGE MOUNTING
4X M6x1.0
10.0

75.0

95.0

STAGE MOUNTING
4X
4.50 THRU(CLEARANCE FOR M4 SHCS)

156.8

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NANO Technology

ANT95L-075 DIMENSIONS
ANT95L-075
502547.5

ANT95L Series

CUSTOMER MOUNTING
27x M4x0.75.062.55025PIN MOTOR / FEEDBACK CONNECTORHEIGHT = 26MM

37.52512.5542X

12.5

5.8 THRU ALL

2537.55062.54068

82.5~875
CABLE
LENGTH

37.5

146
40.5
1/2 HARDSTOPTRAVELDOWEL PIN MOUNTING
4.0
2X 4.008-4.031

165

75

38.5
1/2 LIMITTRAVEL

37.5
1/2 NORMALTRAVEL94

2.5TYP

33

22.5
TYP
10TYP

507595www.aerotech.com

STAGE MOUNTING
4x M6x1.0
1045
TYP

75

20TYP

125

STAGE MOUNTING
4x 4.50 THRU
[CLEARANCE FOR M4 SHCS]

205.540.5

NANO TechnologyANT95L-100 DIMENSIONS

502547.5

ANT95L Series

CUSTOMER MOUNTING
5.0
27x M4x0.7

62.55025PIN MOTOR / FEEDBACK CONNECTORHEIGHT = 26MM

37.5

2512.5
12.5

2X

54

5.8 THRU ALL

2537.5

50

62.5

4068

105~840CABLE
LENGTH146

37.57553
1/2 HARDSTOPTRAVELDOWEL PIN MOUNTING
2X
4.04.0210
50
1/2 NORMALTRAVEL

94

51
1/2 LIMITTRAVEL

2.5
TYP

33

22.5
TYP

5010TYP

7595

STAGE MOUNTING
8x M6x1.0
10STAGE MOUNTING
4x 4.50 THRU
[CLEARANCE FOR M4 SHCS]

67.5
TYP42.5TYP
17.5TYP

7553125175263

DIMENSIONS: MILLIMETERS

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-MP (MOUNTING PLATE, BREADBOARD)

ANT95L-025

STAGE MOUNTING
4X M4x0.7 THRU

50.0
22.5

25.0

ANT95L Series

NANO Technology

ANT95L-025L/ANT95L-050 Mounting Plate DIMENSIONS

50.8
2.00

50.0

100.0

75.0

24.6

12.5
10.0

22.1
50.8
2.00

BREADBOARD MOUNTING PATTERN
4X M6 OR 1/4-20 BOLT C'BORE SLOT

95.0

DIMENSIONS: MILLIMETERS-MP (MOUNTING PLATE, BREADBOARD)

ANT95L-050

75.0
50.0

125.0

100.0

76.2
3.00

STAGE MOUNTING
8X M4x0.7 THRU

75.0

50.8
2.00

100.0141.8

BREADBOARD MOUNTING
4X M6 OR 1/4-20 BOLTC'BORE SLOT

10.0

95.0
DIMENSIONS: MILLIMETERS

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7.0C'BOREDEPTH

-MP (MOUNTING PLATE, BREADBOARD)
22.1.87

ANT95L-075

STAGE MOUNTING
4x M4x0.7 THRU

50.8
2.00

57.5
57.1
2.2

50.8
2.050

31.7
1.250100165

125

20

22.5

10

BREADBOARD MOUNTING PATTERN
8x M6 OR 1/4-20 SHCS C'BORE SLOTS95

DIMENSIONS: MILLIMETERS-MP (MOUNTING PLATE, BREADBOARD)
22.1.87

79.6
3.1

50.82.008055

54.2
2.13

152.4
6.00

28.8
1.13

ANT95L-100

STAGE MOUNTING
4x M4x0.7 THRU

101.6
4.050.8
2.0501001252101503022.550951042.5
BREADBOARD MOUNTING PATTERN
8x M6 OR 1/4-20 SHCS C'BORE SLOTSDIMENSIONS: MILLIMETERS

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ANT95L Series

101.6
4.032.5

NANO Technology

ANT95L-75/ANT95L-100 Mounting Plate DIMENSIONSNANO Technology
ANT95L Series

ANT95L Single-Axis Linear Direct-Drive Nanopositioning Stage Series ORDERING INFORMATION
Travel (Required)-025-050-075-10025 mm travel
50 mm travel
75 mm travel
100 mm travel

Mounting Plate (Optional)-MP
Mounting plate
Performance Grade (Required)-PL1
Base performance-PL2
High-accuracy performance, PLUS

Integration (Required)
Aerotech offers both standard and custom integration services to help you get your system fully operational as quickly as possible. The
following standard integration options are available for this system. Please consult Aerotech if you are unsure what level of integration isrequired, or if you desire custom integration support with your system.

-TAS

Integration - Test as system
Testing, integration, and documentation of a group of components as a complete system that will be used
together (ex: drive, controller, and stage). This includes parameter file generation, system tuning, anddocumentation of the system configuration.

-TAC

Integration - Test as components
Testing and integration of individual items as discrete components that ship together. This is typically used forspare parts, replacement parts, or items that will not be used together. These components may or may not be partof a larger system.

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