EHS Report

Plant and Office Initiatives for
the Environment

In addition to our efforts to reduce CO 2 emissions

Measures to Help Prevent Global Warming

substances in consideration of their impact on theby half and lower energy consumption, we areproactively working to conserve resources,
minimize waste and promote recycling. We are also
fully committed to rigorously managing chemical
environment as well as general health and safety.

Reducing Energy Consumption
In accordance with Tokyo Electron’s Environmental Commitment,
the TEL Group aims to achieve a 50% reduction in CO2 emissions
per unit of sales by fiscal 2015 compared with the base year of
1

fiscal 2008. In order to achieve this target, we began to makeinvestments in fiscal 2010 that are expected to reduce our CO2
emissions by approximately 5,000 tons cumulatively, while infiscal 2011 specific measures were taken at our manufacturing
sites and offices in order to reduce energy consumption. As an

Q Electricity Consumption(Million kWh)

300

270.1

263.7

249.6

16.5

9.9

247.2

260.2

237.1

2008

2009

23.8

16.0

200

100

253.9

231.8

12.5

230.1

215.8

example of Group-wide initiatives outside Japan, Tokyo Electron
U.S. Holdings, Inc. is implementing environmental measures that0

include purchasing green electricity.

Energy Consumption and CO2 Emissions
Energy consumption in fiscal 2011 increased by approximately

2007
Japan

2010

2011 (FY)

Overseas

Q Breakdown of CO2 Emissions from Energy Consumption

10% compared to fiscal 2010 partly due to increased production2%

as a result of the growing shipment volume in each region. On

2%3%

the other hand, we were able to reduce our use of heavy oil by1%

1%Electricity
Heavy oilabout 16% as a result of recent efforts to shift energy sources.

Kerosene

FY2011

98,382t

CO2 emissions from the use of energy increased by 8%compared to fiscal 2010. There was a significant increase in our

Processed natural gas
LPG

91%

overseas CO2 emissions, which was attributable to expanded

Light oil, others

scope for calculations of emissions in the United States and thelaunch of operations at
our new technology

Q CO2 Emissions from Energy Consumption

center in Taiwan. In(t)(100 million yen/t)

110,695

113,169

116,023

per unit of sales, we

6,449

7,335

8,335

achieved a significant

104,246

105,834

107,688

terms of CO2 emissions

improvement of morethan 30%.

120,000

80,000PV power generation systemat the Yamanashi Plant

Reducing the Use of Greenhouse Gases
Other than CO2

90,665
8,994
81,67122.8
40,000

0

13.0

12.5

2007

2008

CO2 emissions(Japan)In the process development of products, as well as dry etching

21.7

2009

2010

98,382
13,53730

84,845

20

14.7

10

2011

(FY)

0

CO2 emissions perunit of sales

CO2 emissions(overseas)

and cleaning processes, we use hydrofluorocarbons (HFCs),
perfluorocarbons (PFCs) and sulfur hexafluoride (SF6), which
are greenhouse gases. In fiscal 2011, our use of these chemicals
increased as a result of an increase in production and additions
to the number of plants covered in our calculations, but we are
currently taking measures to address this, including installing a
PFC abatement device in our New Miyagi Plant.
1 CO2 emissions (energy use) per unit of sales: CO2 emissions from energy
consumption/sales.
We used adjusted emission factors for individual electric power providers for theemission factor for electricity consumption in Japan in fiscal 2011. For the emission
factor for electricity consumption overseas, we used estimated factors calculated by theFederation of Electric Power Companies of Japan based on values published by theInternational Energy Agency (IEA).
2 t-CO2: A unit indicating the amount of CO2 and other greenhouse gases emitted, absorbed,
or stored, which is converted to the weight of CO2 with an equivalent greenhouse effect.

20

Q Greenhouse Gases Other Than from Energy Consumption(t-CO2 2)35,573 1,020

35,0003

30,00025,00020,00015,00010,0005,000
021,006 30

15,888770

17,743
165

13,863

10,610 11

8,486

12,231

3,506
3,607

4,350
3,204
3,045
2008

4,052
2,580
2009

3,926
1,421
2010

PFCs

SF6

Others2007
HFCs

28,824

3,053
2,673
2011 (FY)
Overseas

Plant and Office Initiatives for the Environment

Initiatives to Conserve Resources

and stationery and implementing green procurement practices,

introducing products such as paper cups made from agiving preference to environmentally conscious products. We

bamboo-based material. We are also working to raise employee

have also replaced printer toner cartridges for use in our offices

awareness so that they use fewer paper cups and bring theirwith cartridges made from recycled materials and cooperated

own cups to work.

with the manufacturers in recovering end-of-life cartridges.

Efforts to Reduce the Use of Paper

Efforts to Reduce Water Consumption
Our water use in fiscal 2011 increased by approximately 10%,

Our employees are encouraged to use duplex copying, to copy atwhich was due partly to an increase in production. At the samea reduced size, and to digitize information and internal circulars.

time, we are increasing the use of ground water after having

The Group’s total use of copier paper in fiscal 2011

received government approval. As more and more people are

increased significantly over fiscal 2010. This was due in part to abecoming conscious of their water use, we are conducting

broad increase in production and shipments in comparison to

studies on the use of various water resources and recycling

fiscal 2010. However, the total use of copier paper in fiscal 2011

methods. In addition, we are investigating effective ways of

was still less than half of fiscal 2008 figures, while the amountutilizing water, based on our daily efforts to prevent wasted

of paper used as a percentage of sales has also decreased.

water, through the installation of automatic faucets in restrooms
and other facilities and the reuse of water via re-circulating
cooling systems used in our manufacturing processes.

Q Copier Paper Consumption (Japan)

Q Water Consumption(Thousand sheets)(Thousand m3)

100,000

94,127
16,135

1,200

84,41913,483800
50,00077,99270,93630,0098,647
21,3620

2007
Plants

2008

2009

1,161

1,180
48

111
22

2

1,139
65

1

1,090

967

64

49

599

599

1

199

575
504

39,102
25,721531
400

16,30011,508
14,213
2010

531

429

22,80202011 (FY)

Office facilities

2007

2008

Industrial water

TOPICS

498

2009

Tap water

413

MANAGEMENT REPORT

paper and introducing resource-conserving activities by

EHS REPORTWe are encouraging the use of environmentally friendly

resources. Specifically, we are reducing the use of copier paper

SOCIAL REPORTThe TEL Group is working to minimize its use of limited

HIGHLIGHT

Our Approach to Resource Conservation

296
2011 (FY)2010
Groundwater

Overseas use

Rain

Reusing Rainwater (Yamanashi Plant)
RooftopTokyo Electron’s Yamanashi Plant (Fujii) reuses
rainwater as part of its water conservation
program. Rainwater that falls onto the rooftop
of Building No. 1 in the Fujii area is firstElevatedwater tankcollected in the rainwater receiver tank locatedin the basement. After the water is filtered andpurified, it is reused in water-cooled chillers (airconditioners) and scrubbers (air purifiers). We

Coolingdevices, etc.

Filtering device

1st floor

estimate that Building No. 1 has recycled over
30,000 tons of rainwater in the 10 years since
its completion.

Underground pit
Rainwater
filtration tank

Rainwater
receiver tank21

EHS Report

Initiatives for Reducing Waste
Our Approach to Waste Reduction andRecycling
The TEL Group is working hard to reduce and recycle its waste.

Q Recycling Rate and Generation of Incinerated andLandfill Waste (Japan)

foremost, recycle whatever waste is generated to the greatest
extent possible, and dispose of non-recyclable waste in a properand responsible manner.
We separate recyclable waste from non-recyclables, use new
manufacturing processes that do not involve waste generation,
monitor the qualifications of contract waste disposal companies,

(%)

(t)

We work according to a clear policy: minimize waste first and

97.3

500

414

400

97.3

100
0

topics. Some business sites have begun using electronic

288

276

245

80
2007

2008

2009

Incineration and landfill

manifests 1 to ensure proper management of waste materials.

2010

2011 (FY)0

Recycling Rate

Q Breakdown of Waste (Japan)
1%Volume of Waste Generated andRecycling Rates

5%

Liquid waste

10%

Metal/product waste
Plastics

6%

We have set a new target to maintain a recycling rate of greater

100

200

on educational activities related to the sorting of waste and other

2

97.3

Target: Maintain Recycling
Rate of Greater Than 97%

366

300

periodically review final waste disposal practices, and also focus

1 Electronic manifest: A system in which the flow of industrial waste is managed via acommunication network linking information processing centers, companies generating
the waste, waste collection and transportation companies and waste disposal companies,
instead of the conventional paper-based control manifest.

97.0

98.1

FY2011than 97%. In fiscal 2011 our recycling rate was 98.1%, andPaper

12,373t

7%

Wood scraps and packaging materials

63%

8%

compared to fiscal 2009 figures, incinerated and landfill waste

Drink containers
Othersdeclined by 11.2%. Nearly 100% of liquid waste, resulting fromthe chemicals used in our product development and evaluation
processes, is currently being recycled.
2 Recycling rate: Recycled amount ÷ Amount of waste
generated x 100

Q Recycling Rate for Industrial Waste from TEL Group
Plants in Japan
Tohoku Plant

99.3%
99.2%

Sendai Office

99.9%

Yamanashi Plant (Hosaka area)

100%

Yamanashi Plant (Fujii area)

100%

Koshi Plant

100%

Ozu Plant

100%

The TEL Group defines plants where less thanemission plants.” In fiscal 2011, all of our manufacturing plants

Recycling rate

Miyagi (Matsushima) Plant

Zero Emissions
2% of waste generated is incinerated or put into landfill as “zeroPlantin Japan achieved zero emissions as a result of our efforts torecycle and reduce waste.

T O P I CS
Initiatives to Recycle and Reduce the Use of Paper in Offices
At the TEL Group’s corporate head office, we have set up dedicated collection
boxes for confidential documents and recycle these into raw materials for recycled
paper. Before this, we used to shred or incinerate these documents as waste, but

Q Paper Cup Usage with the Fiscal 2004 Level
Set at 100%
(%)

100

100
78

since instituting this new collection system we are now able to recycle 100% of
these documents. When converting this amount of recycled paper into the

64

50

57

equivalent in harvested timber, it shows that we were able to conserve 216 trees infiscal 2011. In addition, encouraging employees to bring their own cups has helped
us reduce our use of paper cups by more than 40% compared to fiscal 2004.

22

0

2004

2009

2010

2011 (FY)Plant and Office Initiatives for the Environment

Management of Chemical Substances(kg)

19,761

20,0004,578

Our Approach to the Management ofChemical Substances

1,221

2,108

10,000The TEL Group uses chemical substances mainly in developing
and manufacturing products. In developing products, whenever

4,118

0

before or use chemical substances in a way that is different fromfacilities and methods, and then assess the environmental anddo not begin using the substances until all the necessary

2007

5,071

9,693

3,962

1,607
1,459
1,200

5,021

5,427

3,977

2008

2009

2010

6,285
847
236
1,225

8,469

2011 (FY)

Hydrogen fluoride and its water soluble salts
Ethylene glycol
XyleneMethylnaphthalene

their traditional usage, we first closely examine the development
operational risks associated with the use of the substances. We

1,359

9,844

5,000

we adopt new chemical substances that have not been used

13,709 169

12,450MANAGEMENT REPORT

15,000HIGHLIGHT

Q Amount of Handled Substances Regulated as Class 1
Designated Chemical Substances under the PRTR Act (Japan)

OthersQ Material Balance of Chemical Substances
Regulated under the PRTR Act
Handledmeasures have been implemented. We are also replacing
dangerous and harmful chemicals used in the manufacturing
Waste
6,437 kg/year

Released into
the air

Transferred to sewage

Compliance with the PRTR Act

1 kg/year

26 kg/year

On-site landfill

In accordance with the Act on Confirmation, etc. of Release
Amounts of Specific Chemical Substances in the Environment
and Promotion of Improvements to the Management Thereof(PRTR Act), we identify the amounts of regulated substances3

used, discharged and transferred, and rigorously control thesesubstances. Hydrogen fluoride, which we use large quantities ofduring the cleaning of test wafers, is covered under this Act. In
addition, in April 2010 a revision to this Act added
methylnaphthalene as a designated chemical substance.

0 kg/year

Released into
water

Removed

0 kg/year

2,100 kg/year

Consumed

Recycled

75 kg/year

5,070 kg/year

3 PRTR (Pollutant Release and Transfer Register): Under the PRTR system, the use ofchemical substances that may be hazardous to human health and the ecosystem, theirrelease into the environment, and their transfer (contained in waste) outside of thebusiness premises are identified, tabulated, and disclosed.

Methylnaphthalene is a substance found in heavy oil and is used

PCB Storage

in boilers and other facilities at some of our business locations.

Based on the Act on the Proper Treatment of PCB Waste and the

Ethylene glycol, which we had been handling in large volumes

Waste Disposal and Public Cleaning Acts, the TEL Group reports

until fiscal 2010, was removed from the list of designatedannually on the storage, management, and disposal of waste

chemical substances by this same revision.

containing polychlorinated biphenyls (PCB) to the governor of

After use, we properly dispose of dangerous and hazardous

SOCIAL REPORT

process with safer substances.

EHS REPORT

13,709 kg/year

the prefectures in which our plants are located. We rigorously

chemical substances either through specialist waste disposal

manage our compliance with the above Acts, as we did so whencontractors or using our in-house processing equipment. Going

trace amounts of PCB were detected from transformers andforward, we will continue to properly manage risk relating tocondensers set for disposal after the demolition of one of ourthese chemical substances.

closed plants in fiscal 2011.

Q Input and Output (FY2011)

Input
Electricity

254.04 million kWh

+9.6%

Gas

1.142 million m3

-2.4%

Fuel

1,826 kl

-7.6%

1.090 million m3+12.7%

Water

OutputChange fromprevious year

Chemical substances

Total product shipment 24,322 tons

+84.8%

CO2 emissions

98,382 tons

+8.5%

NOX emissions

10.5 tons+4.0%

12,373 tons

+22.6%

from energy consumption

The Tokyo
Electron Group

Change fromprevious year

Waste

13.7 tons(regulated as Class 1 designatedchemical substances under the PRTR Act)

+121.0%Recycled amount

12,128 tons

+23.6%

Paper(copier paper)+52.0%

Amount of waste

245 tons-11.2%

155 tons

23