Translation of the original operating instructions

XL3000flex, XL3000flexRC
Leak Detector

Catalog No.
520-200, 520-201
From software version
V3.12 (Operating unit)

jina83en1-10-(2307)

INFICON GmbH
Bonner Strasse 498
50968 Cologne, Germany

INFICON

Table of Contents

Table of Contents
1 About this manual .......................................................................................................................................... 6
1.1 Other associated documents ................................................................................................................... 6
1.2 Warnings .................................................................................................................................................. 6
1.3 Target groups........................................................................................................................................... 6
2 Safety............................................................................................................................................................... 7
2.1 Intended use ............................................................................................................................................ 7
2.2 Duties of the operator............................................................................................................................... 8
2.3 Owner requirements................................................................................................................................. 8
2.4 Dangers.................................................................................................................................................... 8
3 Scope of delivery.......................................................................................................................................... 10
4 Description.................................................................................................................................................... 11
4.1 Function ................................................................................................................................................. 11
4.2 Operation mode "Sniffing" ...................................................................................................................... 12
4.3 Device setup .......................................................................................................................................... 13
4.4 Sniffer line SL3000XL ............................................................................................................................ 17
4.4.1 Device overview.......................................................................................................................... 17
4.4.2 Operating elements on the handle.............................................................................................. 18
4.5 Touchscreen elements........................................................................................................................... 19
4.6 Elements of the error and warning display............................................................................................. 21
4.7 Technical data........................................................................................................................................ 22
4.8 Factory settings...................................................................................................................................... 23
5 Installation .................................................................................................................................................... 27
5.1 Setup...................................................................................................................................................... 27
5.2 Connecting the sniffer line...................................................................................................................... 29
5.3 Mounting the I/O module or bus module (optional) ................................................................................ 29
5.4 Mounting holder for sniffer line (optional)............................................................................................... 30
5.5 XL3000flexRC only: Assemble data cable and CU1000........................................................................ 31
6 Operation ...................................................................................................................................................... 33
6.1 Switching the device on ......................................................................................................................... 33
6.2 Basic settings ......................................................................................................................................... 33
6.2.1 Setting the language ................................................................................................................... 33
6.2.2 Setting date and time .................................................................................................................. 34
6.2.3 Selecting a unit for the leak rate ................................................................................................. 34
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6.2.4 Select display unit for pressure................................................................................................... 35
6.2.5 Select interface unit for pressure ................................................................................................ 35
6.2.6 Settings for the XL sniffer adapter .............................................................................................. 35
6.2.7 Operator types and authorizations.............................................................................................. 38
6.2.7.1

Logging out the operator.................................................................................................... 39

6.2.8 Setting the audio alarm ............................................................................................................... 39
6.2.9 Cathode Selection....................................................................................................................... 40
6.2.10 Changing the display of the axes................................................................................................ 40
6.2.11 Changing the display of measured values .................................................................................. 41
6.2.12 Displaying Calibration Instructions.............................................................................................. 42
6.2.13 Show calibration request............................................................................................................. 42
6.2.14 Show warnings............................................................................................................................ 42
6.2.15 Automatic switch-off of the touchscreen ..................................................................................... 42
6.2.16 Changing the display brightness................................................................................................. 43
6.2.17 Show setpoint ............................................................................................................................. 43
6.2.18 Assigning favorite buttons........................................................................................................... 43
6.2.19 Selecting the type of expansion module ..................................................................................... 43
6.2.20 General interface settings (I/O module) ...................................................................................... 44
6.2.21 Assigning analog outputs of the I/O module ............................................................................... 44
6.2.22 Assigning the digital inputs of the I/O module............................................................................. 47
6.2.23 Assigning the digital outputs of the I/O module........................................................................... 50
6.2.24 Settings for bus module BM1000................................................................................................ 52
6.2.25 Operation mode “Sniffing”........................................................................................................... 52
6.3 Settings for the measurements .............................................................................................................. 53
6.3.1 Select gas type (mass) ............................................................................................................... 53
6.3.2 Display equivalence leak rate for other gas ................................................................................ 53
6.3.2.1

Gas equivalent selection.................................................................................................... 54

6.3.2.2

Configure gas list ............................................................................................................... 54

6.3.2.3

Calculate equivalence factor.............................................................................................. 55

6.3.2.4

Set equivalence factor and molar mass............................................................................. 56

6.3.3 Setting setpoints ......................................................................................................................... 57
6.3.4 Calibrating the device ................................................................................................................. 58

iv

6.3.4.1

Time and general preferences........................................................................................... 58

6.3.4.2

External Calibration Configuration and Start ..................................................................... 59

6.3.4.3

Check the calibration ......................................................................................................... 61

6.3.4.4

Calibration using the external calibration leak test ............................................................ 61

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Table of Contents

6.3.4.5

External calibration with sniffer line SL3000XL.................................................................. 62

6.3.4.6

Automate external calibration with CalMate (optional) ...................................................... 63

6.3.4.7

Entering the calibration factor ............................................................................................ 64

6.3.4.8

Calibration factor sniffing ................................................................................................... 64

6.3.5 Suppressing gas backgrounds with "ZERO" functions ............................................................... 65
6.4 Measuring .............................................................................................................................................. 67
6.5 Measurement result display with signal filters........................................................................................ 67
6.6 Recording data....................................................................................................................................... 68
6.7 Copying measurement data, deleting measurement data ..................................................................... 70
6.8 Updating the software ............................................................................................................................ 70
6.8.1 Updating the software of the control unit .................................................................................... 70
6.8.2 Updating the software of the I/O module .................................................................................... 71
6.9 Calling up information ............................................................................................................................ 72
6.10 Display, save, load parameters.............................................................................................................. 74
6.11 Resetting the settings............................................................................................................................. 75
7 Warning and error messages...................................................................................................................... 76
7.1 Display warnings as errors..................................................................................................................... 84
8 Cleaning and maintenance.......................................................................................................................... 86
8.1 Cleaning the housing ............................................................................................................................. 86
8.2 Maintenance of the XL3000flex.............................................................................................................. 86
8.2.1 Change the filter mat of the fan input.......................................................................................... 86
8.2.2 Replacing the fuses .................................................................................................................... 87
8.2.3 Replacing the filter cartridge on the sniffer probe ....................................................................... 87
8.2.4 Maintenance by the manufacturer .............................................................................................. 89
8.2.5 Maintenance plan........................................................................................................................ 90
9 Decommissioning the measuring instrument ........................................................................................... 91
9.1 Disposing of the device .......................................................................................................................... 91
9.2 Returning the device for maintenance, repair or disposal...................................................................... 91
10 Gas library..................................................................................................................................................... 93
11 Accessories ................................................................................................................................................ 101
12 CE Declaration of Conformity ................................................................................................................... 102
13 RoHS............................................................................................................................................................ 104
Index ............................................................................................................................................................ 105

XL3000flex-Operating-instructions-jina83en1-10-(2307)v

1 | About this manual

INFICON

1 About this manualThis document applies to the software version stated on the title page.
Product names may occur in the document, which are added for identification
purposes only and belong to the respective owner of the rights.

1.1 Other associated documents
Interface protocols

jira54

Bus module BM1000

jiqb10I/O module IO1000

jiqc101.2 Warnings
DANGER
Imminent hazard resulting in death or serious injuries

WARNING
Hazardous situation resulting in potential death or serious injuries

CAUTION
Hazardous situation resulting in minor injuries

NOTICE
Hazardous situation resulting in damage to property or the environment

1.3 Target groups
This instruction manual is intended for operators and technically qualified personnel
with experience in leak detection technology and the integration of leak detectors inleak detection systems. In addition, the installation and use of the device require
knowledge of electronic interfaces.

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Safety | 2

2 Safety
2.1 Intended use
The XL3000flex is a helium or hydrogen leak detector for sniffing detection. With thedevice you locate and quantify leaks on test objects.
A test object always contains gas under overpressure. Check the exterior of the test
objects for escaping gas using a sniffer line (sniffing method).
• Only operate the device as intended, as described in the operating instructions, inorder to avoid hazards due to incorrect use.
• Comply with application limits, see "Technical Data".
Incorrect usage

Avoid the following unintended uses:• Use outside the technical specifications, see "Technical Specifications"• Use in radioactive areas• Using the device with detectable defects or defective power switch• Use of accessories or spare parts, which are not included in this instruction
manual• Test of wet or damp test objects• Sniffing of explosive, aggressive, corrosive, flammable, toxic or reactive
substances• Sniffing of condensable fluids and vapors• Sniffing of gases contaminated with particles• Using the sniffer line handle over a long period of time, leading to fatigue.
• Sniffing of gases above the lower explosion limit. The allowable composition ofvenal gas mixtures can be read in the safety data sheets of the respective
manufacturers.
• Using the device in potentially explosive atmospheres• Aspirate liquids into the device via the sniffer line
• Operation at too high ambient temperature• Inspecting electrically live conductors or objects with a sniffer line
• Using the device as a seat or step
• Raising the device with the handles when the feet are facing up. Otherwise yourhands may get trapped.
• Inserting the sniffer tip into body orifices.

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2.2 Duties of the operator• Read, observe, and follow the information in this manual and in the work
instructions provided by the owner. This concerns in particular the safety andwarning instructions.
• Always observe the complete operating instructions for all work.
• If you have any questions about operation or maintenance that are not answeredin this operating instructions, contact INFICON service.

2.3 Owner requirements
The following notes are for companies or any person who is responsible for the safety
and effective use of the product by the user, employee or third party.

Safety conscious operation• Operate the device only if it is in perfect technical condition and has no damage.
• Only operate the device in accordance with this instruction manual, in a safety andrisk conscious manner.
• Adhere to the following regulations and observe their compliance:– Intended use– General applicable safety and accident prevention regulations– International, national and local standards and guidelines– Additional device-related provisions and regulations• Only use original parts or parts approved by the manufacturer.
• Keep this instruction manual available on site.

Personnel qualifications• Only have qualified personnel make the basic settings on the device. The handlingof the sniffer line can also be done by laymen according to instructions.

2.4 Dangers
The measuring instrument was built according to the state-of-the-art and therecognized safety regulations. Nevertheless, improper use may result in risk to life andlimb on the part of the user or third parties, or damage to the unit or other property
may occur.
Hazards due toLiquids and chemical substances can damage the instrument.

liquids and chemicals• Comply with application limits, see "Technical Data".
• Do not suck up liquids with the instrument.

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Safety | 2• Avoid sniffing gases, such as hydrogen, above the lower explosion limit. The
allowable composition of venal gas mixtures can be read in the safety data sheetsof the respective manufacturers.
• Only use the device away from areas with a risk of explosions.
Dangers from electric

There is a danger to life from the contact of conductive parts inside the device.

power• Disconnect the device from the power supply prior to any installation andmaintenance work. Make sure that the electric power supply cannot reconnectedwithout authorization.
The device contains electric components that can be damaged from high electric
voltage.
• Before connecting to the power supply, make sure that the mains voltage on site iswithin the permitted operating voltage range.
The permitted operating voltage range is indicated on the device.

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INFICON

3 Scope of delivery
Item
XL3000flex or XL3000flexRC

Quantity
1)

1

USB stick (instruction manuals and short instructions in all

1

available languages)
Filter set for fans2

Set of fuses

1

Power supply cable USA

1

Power supply cable UK

1

Power supply cable JP

1

Power supply cable EU

1

Goods issue inspection log

1

Touch PIN

1

Short instruction

11) XL3000flexRC in standard scope of delivery without data cable and CU1000 control
unit. Both are required for the described function. See also "Accessories [} 101]".
► Check the delivery contents after receiving the product to ensure it is complete.

Necessary accessories for operation
For operating the XL3000flex you need a sniffer line SL3000XL. It is available invarious lengths:- SL3000XL XL, length 3 m, order number 521-011- SL3000XL XL, length 5 m, order number 521-012- SL3000XL XL, length 10 m, order number 521-013- SL3000XL XL, length 15 m, order number 521-014
Further accessories see “Accessories [} 101]“.

► Always store the device in compliance with the technical data, see Technical data[} 22].

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Description | 4

4 Description
4.1 Function
The XL3000flex is a detection device for the tracer gases helium and hydrogen.
The device is designed for leak detection with the SL3000XL sniffer line, which isavailable in different lengths. With this sniffer line, you can detect leaks at a greater
distance (high Flow) from the suspected leak if the detection limit has deteriorated andswitch to low flow for more accurate localization.
Digital data can be exchanged via the optionally available I/O module IO1000 or bus
module BM1000.

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4 | Description

INFICON

4.2 Operation mode "Sniffing"
The XL3000flex has been developed exclusively for the "sniffing" mode. For operating
you need a sniffer line SL3000XL. It is available in various lengths, see "Scope ofdelivery and additional equipment".
The sniffer line SL3000XL is connected to the connection provided on the front of thedevice, see "Device setup [} 13]".

Sniffer line SL3000XL
SL3000XL< 2 x 10-7 mbar l/s

Detection limit
Gas flow (low flow / high flow)(300 sccm / 3000 sccm)

Available lengths

3 / 5 / 10 / 15 m

Cable sleeve

Plastic

Good-Bad-DIsplay

YES

ZERO via button

YES

Connection on the device

via a separate sleeve on
the front of the device

Display with measurement view

YES

Acknowledge faults via buttons on the sniffer probe

YES

End standby via a button on the sniffer probe

YES

Acknowledge calibration via a button on the sniffer

YES

probe

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Description | 4

4.3 Device setup
XL3000flex: Front view

1

8
1

3

2

Connection for sniffer line

7

6 5

5

Status LED of the operating unit.

SL3000XL

4Shines: Control unit operates
normally
Flashes: Display in power savingmode

2

Touchscreen

6

Connection for USB stick3

Area for fixing a holder for the7

Reset button, can be triggered bysniffer line4

Speakerkey PIN
8

Status LED A permanently lit
status LED shows that the sniffer
line is supplied with voltage.

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4 | Description

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XL3000flexRC: Front view

1

3

2

4
1

Connection for sniffer line

4

SL3000XL

Status LED A permanently lit
status LED shows that the sniffer
line is supplied with voltage.

2

Interface for a data cable forconnection to an external control
unit CU1000.
See also "XL3000flexRC only:
Assemble data cable and CU1000[} 31]".

3

Area for fixing a holder for thesniffer line

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Description | 4

Back view

1

8 7

6

2

5 4

3

1

Filter ventilator inlet

5Power cable connection2

Filter ventilator inlet

6

Mounting screws for a profile rail(for mounting the I/O module
IO1000 or the bus module,
optional)

3

Device power ON/OFF switch

7

Connection "TL" for connection
cable to calibration adapter forcalibration leaks

4Electrical fuse

8

Connection “LD“ for the data cableof the I/O module or bus module

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4 | Description

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View from below

1
1

filter fan outputs

2
2

Rubber feet (4 pieces)

Side handles for transportation

1
1

1

Transport handles

Do not open the device!

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Description | 4

4.4 Sniffer line SL3000XL
4.4.1 Device overview

1
2

1 Connection SL3000XL, connection for 2 The status LED indicates thethe sniffer line on the front

operating status. A permanently lit
status LED shows that the sniffer line
is supplied with voltage.

Necessary accessories for operation
For operating the XL300flex you need the sniffer line SL3000XL. It is available indifferent lengths (see Scope of delivery and additional equipment).

See also
2 Connecting the sniffer line [} 29]

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4 | Description

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4.4.2 Operating elements on the handle
The display of the handle displays part of the information of the main display.

Fig. 1: Sniffer line SL3000XL

The leak rate is shown as a bar graph and displayed numerically. The unit ofmeasurement is the same as in the main display.
The display also shows the gas type and the tracer gas concentration. If the
XL3000flex is operated in the high flow operation mode, then the gas type display has
a dark background.
Warning or error messages are shown on the display. The message is confirmed withthe right button. The right button can otherwise be used to switch between low flow
and high flow.
The left button can be used for a ZERO-adjustment: The background display is set
toZERO by pressing the key.
The sniffer probe is equipped with LEDs for work in dimly lit places.

WARNING
Danger of eye damage or headaches
LEDs generate a bundled light that can damage your eyes.
► Do not look into the LEDs from a short distance or for longer periods of time.

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Description | 4

4.5 Touchscreen elements
3

2

1

4

6

5

7

8

15

9

14

10

13

11

12

Fig. 2: Measurement display

1

Keyboard lock2

Communication status

3

Operator

4

ZERO

5

Message

6

Tracer gas

7

Operation mode

8

Leak rate with peak hold 9Graphic representation of thefunctionleak rate and the peak holdfunction

10

Time axis

11

Button "Favorite 2"

12

Button "Favorite 1"

13

Menu

14

Value axis

15

Value axis

1 - Keyboard lock
The control unit is locked or unlocked by pressing and holding the icon for the
keyboard lock.

2 - Icon for the communication status• Icon connected: The device communicates with the mass spectrometer module.
• Icon disconnected: The device does not communicate with the mass spectrometer
module.

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4 | Description

INFICON► To reset the control unit, press the reset button with the key PIN, see also “Device
setup [} 13]“, first illustration.

3 - Operator
The registered operator is shown abbreviated.
Display

Meaning

Ope

Operator

Sup

Supervisor

Int

Integrator

Ser

Service4 - ZERO
Background suppression is active.

5 - Caution icon
Active warnings are stored in the unit.
The active warnings can be displayed via the menu "Info > History > Warnings".

6 - Tracer gas
Set tracer gas and tracer gas concentration percentage.
Display

Meaning

He

Helium (4He)

H2HydrogenM3

E.g. H-D, 3He or H3

7 - Operation mode
Configured operation mode
Display

Operation mode

LOW FLOW

XL sniffer adapter in LOW FLOWHIGH FLOW

XL sniffer adapter in HIGH FLOW

8 - Leak rate
Current measurement for the leak rate.

9 - Graph
Graphic display of the leak rate Q(t).

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Description | 4

10 - Leak rate
Time axis of the leak rate Q(t).

11 - Button "Favorite 2"
You can assign preferred parameters to this key.

12 - Button "Favorite 1"
You can assign preferred parameters to this key.

13 - Icon for the menu
All functions and parameters of the control unit can be accessed using the "Menu"
key .
A full representation of the menu is included on the supplied USB stick.

14 - Value axis
Value axis of the leak rate Q(t).

15 - Device of measurement
Device of measurement of the value axis.

4.6 Elements of the error and warning display

WARNING
Number: 500
Displayed

Pressure sensor not connected

messagewith details(Value = 4.23E-2)
Further errors or warnings

501

502

To the display
further active
errors or
warnings(if present)

Detailed display
further active
errors orInformation to

warnings

cause or remedy(if present)

to the message shown

To confirm
all messages

above

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4 | Description

INFICON

4.7 Technical data
Mechanical data
XL3000flex
Dimensions (L × W × H)

544 x 404 x 358 mm

Weight37.5 kg

XL3000flexRC
Dimensions (L × W × H)

544 x 404 x 358 mm

Weight36.5 kgElectrical data
XL3000flex, XL3000flexRC
Power

280 VA

Operating voltage

100 - 240 V ±10%, 50 / 60 Hz

Main fuse

2x T6,3 A 250 V

Protection class

EN 60529 IP30
UL 50E Type 1

Overvoltage categoryII

Physical data
XL3000flex, XL3000flexRC
Run-up time

150 s

Detectable gases

Helium, hydrogen

Detectable masses

4

Ion source

2 longlife Iridium filaments, Yttrium-oxide

He, H2, Mass 3 (e.g. H-D, 3He or H3)

coatedGas flow1• High flow

3000 sccm• Low flow

300 sccm

Minimum detectable leak rate (MDLR)• Helium

22 / 108• High flow

2 x 10-6 mbar l/s• Low flow

2 x 10-7 mbar l/s

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Description | 4

XL3000flex, XL3000flexRC• Forming gas (95/5)• High flow

2 x 10-6 mbar l/s• Low flow

2 x 10-7 mbar l/s

Response time
• High flow

<1s

• Low flow

<1s

The A-weighted emission sound pressure level at the operator's location is less than
70 dB (A) for all foreseeable uses of the device. The noise emission measurement
declaration was drawn up in accordance with the harmonized standard DIN EN ISO
3744:2011.
1

Measured at 1 atm (1013 mbar) at sea level. The gas pressure changes withatmospheric pressure and thus also with the geographical altitude.

Ambient conditions
XL3000flex, XL3000flexRC
Permissible ambient temperature (during

10 °C ... 40°C

operation)
Max. altitude above sea level2000 mMax. relative humidity ≤ 31°C

80 %Max. relative humidity > 31°C

50 %Storage temperature-20 °C ... 60°C

Degree of contamination

2

4.8 Factory settings
The following table shows the factory settings in the "Sniffing"mode.
Parameter

Factory setting

AO upper limit exp.

1 x 10-5

Equivalent factor mass 2 (H2)

1.0

Equivalent factor mass 3

1.0

Equivalent factor mass 4 (He)

1.0

Molar mass of the equivalence gas (test gas

2.0

mass 2 (H2))
Molar mass of the equivalence gas (test gas

3.0

mass 3)

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4 | Description

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Parameter

Factory setting

Molar mass of the equivalence gas (test gas

4.0

mass 4 (He))
Operation mode

XL Sniffer Adapter

Bus module address

126

Pressure capillary blocked(Low Flow)

0.2 mbarPressure capillary broken(Low Flow)

0.6 mbar

Clogged pressure capillary monitoring- with XL Sniffer Adapter (High Flow)

150 mbar

Broken pressure capillary monitoring- with XL Sniffer Adapter (High Flow)

400 mbarPressure unit (interface)mbar

EmissionOn

Filter leak rate threshold1 x 10-10

Filter ZERO time

5s

Filter mode

I-FilterGas percentage in H2 (M3, He)

5 % H2 , 100 % M3, 100% He

Gas ballast

Off

I/O module log

ASCII

Calibration requestOn

Calibration factor VAC/SNIF Mx

1.0(for vacuum, sniffing and all masses)
Cathode selection

Auto Cat1

Compatibility mode

XL Sniffer Adapter

Config. Analog output 1

Leak rate mantissa

Config. Analog output 2

Leak rate exponent

Config. Analog output scaling

0.5 V / decade

Configuration of digital outputs

Pin 1: Trigger 1, inverted
Pin 2: Trigger 2, inverted
Pin 3: Trigger 3, inverted
Pin 4: Trigger 4, inverted
Pin 5: ReadyPin 6: Error, inverted
Pin 7: CAL request, inverted
Pin 8: Open, inverted

Configuration of digital Inputs

Pin 1: Select dyn. / normal CAL
Pin 2: Sniff
Pin 3: Start/Stop, inverted

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Description | 4

Parameter

Factory setting
Pin 4: ZERO
Pin 5: External CAL
Pin 6: Internal CAL
Pin 7: Clear
Pin 8: ZERO update
Pin 9: –Pin 10: –Leak rate unit SNIF, (display and interface)mbar l/s

Leak rate unit VAC, (display and interface)mbar l/s

Leak rate upper limit VAC (interface)

1.0 x 104

Leak rate lower limit VAC (interface)

1.0 x 10-12

Leak rate upper limit SNIF (interface)

1.0 x 104

Leak rate lower limit SNIF (interface)

1.0 x 10-8

Fan mode

Fan always on

Machine factor in standby

Off

Machine factor / Sniff factor

1.0 (for all masses)

Mass

4

Module on the I/O connection

IO1000Nominal state TMP

On

calibration leak external SNIF

9.9 x 10-2

calibration leak external VAC

9.9 x 10-2

calibration leak internal

9.9 x 10-2

Open calibration leak internal

Off

Sniffer line detection

On

Sniffer LED Alarm Configured

Flashing

Sniffer light brightness

5

Sniffer beep

Trigger

Sniffer button FlowOn

Sniffer key ZEROOn

Language

EnglishMuting the beep

Off

TMP rotation speed

1000

Trigger level 1 (2, 3, 4)

2 x 10-4 mbar l/s(1 x 10-5) mbar l/s

Preamplifier test at CAL

On

Maintenance warning

TMP and diaphragm pump

ZERO with startOn

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4 | Description

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Parameter

Factory setting

ZERO mode

Suppress everything

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Installation | 5

5 Installation
The structure of the device, see “Device setup [} 13]“.

5.1 Setup
WARNING
Danger from moisture and electricity
Moisture entering the device can lead to personal injury due to electric shocks as well
as damage to property due to short circuiting.
► Only operate the device in dry environments and only in buildings.
► Operate the device away from sources of liquid and moisture.
► Position the device so that you can always reach the power plug to unplug thedevice.
► Do not operate the device in standing water and do not allow even a drop of wateror other liquid on the device.
► Prevent the device from coming into contact with bases, acids and solvents.

WARNING
Danger from electric shock
Improperly grounded or fused products may be dangerous to life in case of a fault.
The use of the device is not permitted without a connected protective conductor.
► Only use the included 3-wire power cable.
► Make sure that the power supply plug is always accessible.

CAUTION
Risk of injury from lifting the heavy device
The device weighs approx. 37 kg and can slip out of your hands.
► Lift and transport the device only with persons who are physically able to do so.
► Lift and transport the device at least in pairs.
► To lift, grasp the handle grips on the sides of the device.
► To avoid crushing the hands, the feet of the device must not point upwards when it
is lifted or transported.
► The device must not be lifted and transported with just one handle.

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5 | Installation

INFICONCAUTION
Risk of injury due to improper installation
If the device is not placed on a flat, non-slip surface, it may fall and cause personal
injury or property damage.
► Place the device on a level, slip-proof work area.

NOTICE
Material damage from overheated device
The device heats up during operation and can overheat without sufficient ventilation.
► Please note the technical data.
► Ensure sufficient ventilation, especially on the ventilation slots on the rear andbottom: There should be free space in the front, to the rear and sides of the unit ofat least 20 cm.
► Device should be placed on a flat surface to ensure proper air intake from thebottom of the device.
► Keep heat sources away from the device.

NOTICE
Damage to the turbo molecular pump due to jerking movements
Jerking movements can damage the running turbo molecular pump.
► Avoid any jerking movements or vibrations to the device during operation and for up
to 2 minutes after switching off.

• Place the device on a level, slip-proof work area.
• Prevent tripping hazards when placing the device and connecting lines.

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Installation | 5

5.2 Connecting the sniffer line
Connect the sniffer line before you start up the device.

1

1

Connection for sniffer line
1

Align the red marking on the sniffer line plug with the red marking on the socketof the device.

2

Push the sniffer line plug into the socket on the device until it locks into place.
The plug may no longer be easy to move.

5.3 Mounting the I/O module or bus module(optional)
Both modules are interfaces for controlling the leak detector XL3000flex.

ü You have a separately available I/O module or bus module. See also "Accessories[} 101]".
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5 | Installation

INFICONü You have a commercially available DIN-TS35 DIN rail.
1

Place the sniffer leak detector at least 20 cm away on all sides.

2

Connect the SL3000XL sniffer cable to the front of the XL3000flex.

3

Fasten the DIN rail using the screws already located in the threaded holes on
the back of the device (see Device setup [} 13]).

4

Then hook the module into the DIN rail at the bottom, press it against the DIN
rail at the top and let it snap into place.

5

Connect the I/O module or the bus module to the LD socket on the rear of the
XL3000flex using an INFICON data cable. Cable length < 30 m.

See also
2 Selecting the type of expansion module [} 43]
2 Assigning analog outputs of the I/O module [} 44]
2 Settings for bus module BM1000 [} 52]

5.4 Mounting holder for sniffer line (optional)
WARNING
Danger to pacemaker wearers from magnets
The function of a pacemaker can be influenced by the magnet on the back of theholder.
► If you wear a pacemaker, do not install it yourself.
► If you wear a pacemaker, always maintain a distance of at least 10 cm from theholder when operating the device.

CAUTION
Risk of injury due to sniffer tip
If you fall on the sniffing tip after stumbling, for example, you may injure your eyes.
► To prevent injury from accidental contact with the sniffer tip, align the sniffer tip in
the holder so that it points away from the operator.
A bracket is available for the sniffer tip. The holder can be mounted on the front of thedevice, see also “Device setup [} 13]“.

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Installation | 5

1

Hang the holder with its hooks in the slots on the front of the device.

2

Press the holder against the front panel of the device.
ð The holder is pulled to the front panel of the device with a magnet on its rear.

3

When not in use, fix the sniffer line in the holder so that it points away from theoperator.

5.5 XL3000flexRC only: Assemble data cable andCU1000

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5 | Installation

INFICON► Connect the leak detector and the separate CU1000 via a data cable. Cable
length < 30 m. Use the interface on the front of the device for this purpose.

Accessories required
The XL3000flexRC is delivered in the standard scope of delivery without data cable
and CU1000 control unit. Both are required for the described function.
See also "Accessories [} 101]" and the operating instructions for the CU1000 control
unit.

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Operation | 6

6 Operation
6.1 Switching the device on► Turn on the XL3000flex via the power switch on the back of the device, see“Device setup [} 13]“.
ðThe system is starting automatically.

ðAfter the start-up, the green LED on the front cover of the XL3000flex lights up.

6.2 Basic settings
The device is assembled and preconfigured so that basic settings have already beenmade.
To check or change settings, first take a look at the factory defaults. See factory
settings of the XL3000flex (Factory settings [} 23]).

6.2.1 Setting the language
Select the display language. The factory setting is English. (The display on thehandle of the SL3000XL sniffer line shows messages in English instead of in
Russian and Chinese.)
GermanEnglishFrenchItalian
SpanishPortuguese
RussianChineseJapanese

Control unit

Main Menu > Settings > Setup > Control unit >Language

LD protocol

Command 398

ASCII protocol*CONFig:LANG

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6.2.2 Setting date and time
Setting the date
Format: DD.MM.YY

Control unit

Main Menu > Settings > Date/Time > Date

LD protocol

Command 450

ASCII protocol*HOUR:DATE

Setting the time
Format: hh: mm

Control unit

Main Menu > Settings > Date/Time > TimeLD protocol

Command 450

ASCII protocol*HOUR:TIME

6.2.3 Selecting a unit for the leak rate
Leak rate unit
display

Leak rate unit
interface

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Selecting the leak rate unit in the display for sniffing
0

mbar l/s (factory setting)1

Pa m3/s2

atm cc/s

3Torr l/s

4

ppm

5

g/a

6

oz/yr

7

sccm

8

sft3/yr

Control unit

Main Menu > Display > Units (Display) > Leak Rate Unit SNIFLD protocol

Command 396 (Index 1: Sniffing)

ASCII protocol

Command *CONFig:UNIT:SNDisplay

Selecting the leak rate unit of the interfaces for sniffing
0

mbar l/s (factory setting)1

Pa m3/s2

atm cc/s

3Torr l/s

4

ppm

5

g/a

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Operation | 6

6

oz/yr

7

sccm

8

sft3/yr

Control unit

Settings > Set up > Interfaces > Units (interface) > Leak rate unit
SNIF

LD protocol

Command 432 (sniffing)

ASCII protocol

Command *CONFig:UNIT:LRSnif

6.2.4 Select display unit for pressure
Device of pressure
mbar

atm

Pa

Torr

Control unit

Main menu > Display > Units (display) > Pressure unit

6.2.5 Select interface unit for pressure
Pressure unit

Selecting the pressure device of the interfaces

interface0

mbar (factory setting)

1

Pa

2

atm

3

Torr

Control unit

Main Menu > Settings > Setup > Interfaces > Units (Interface) >Pressure Unit

LD protocol

Command 430 (sniffing)

ASCII protocol

Command *CONFig:UNIT:Pressure

6.2.6 Settings for the XL sniffer adapter
For operation with the XL Sniffer Adapter you have to use the– SL3000XL sniffer line,– Select the "XL Sniffer Adapter" operation mode, see "Operation mode “Sniffing”[} 52]".
Function of right

Activate or deactivating the right key of the SL3000XL sniffer line (switching between

sniffer key

low flow and high flow). Deactivating the key prevents an inadvertent influencing of
the measurement.

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INFICON

Control unit

Settings > Set up > Operation modes > Sniff > Sniffer > Keys >Sniffer flow key

Search Function

LD protocol

Command 415

ASCII protocol

Command *CONFig:HFButton

When the search function is activated, the alarm is automatically connected to
Trigger 2 as soon as it is switched to High Flow.
• Switched-off Search Function: Alarm, when Trigger 1 is exceeded.
• Switched-on Search Function and operation in Low Flow: Alarm, when Trigger 1
is exceeded.
• Switched-on Search Function and operation in High Flow: Alarm, when Trigger 2
is exceeded.
0

Off

1

On

Control unit

Setting > Trigger > Search

LD protocol

Command 380

ASCII protocol

Command *CONFig:SEARch

In the SL3000XL the following are dependent on the trigger used; the leak rate bar,changing the background lighting, the beeper and changing the sniffer tip lighting.
Sniffer LEDs:

Set the brightness of the LEDs designed to illuminate the spot under examination.

Brightness

This setting refers to the measurement process without LED alarm configuration, see
below.
From "0" (off) to "6" (max.)

Control unit

Settings > Set up > Operation modes > Sniff > Sniffer > LED >Sniffer LED brightness

Sniffer LEDs: Alarm
configuration

LD protocol

Command 414

ASCII protocol

Command *CONFig:BRIGHTness

Behavior of the LEDs on the sniffer, when trigger value 1 is exceeded.
Off

No response

Flashing

The LEDs are flashing

Brighter

The LEDs shine with maximum brightness.

Control unit

Settings > Set up > Operation modes > Sniff > Sniffer > LED >Sniffer LED alarm config.

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LD protocol

Command 413

ASCII protocol

Command *CONFig:LIGHTAlarm

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Sniffer beep: Alarm
configuration

Operation | 6

Response by the beep on the sniffer if the trigger value is exceeded.
Off

No response

Trigger

Acoustic signal / vibration alarm

Control unit

Settings > Set up > Operation modes > Sniff > Sniffer > Beep >Sniffer BeepLD protocol

Command 417

ASCII protocol

Command *CONFig:BEEP

Display of the

The sniffing with forming gas involves the use of hydrogen. The hydrogenhydrogen percentage

percentage is taken into consideration with this specification. This will increase thedisplayed leak rate by the corresponding factor. You can also set the gas percentage
for other gases (M3, He).
0 ... 100 %Control unit

Settings > Set up > Operation modes > Sniff > Gas percentage >Mass2 > Gas percentage H2

Auto standby interval

LD protocol

Command 416

ASCII protocol

Command *CONFig:PERcent

Defines the duration in minutes until standby is activated. If the device operates inhigh flow, the filters of the sniffer line will foul up more quickly. Auto standby switches
to low flow for protection. Moving the sniffer line automatically switches thepreviously selected flow back on.
From "0" (off) to "60" (max.)

Control unit

Settings > Set up > Operation modes > Sniff > Auto standby >Interval auto standby

LD protocol

Command 480

ASCII protocol

Command *CONFig:STANDBYDel

Pressure value XLYou set a minimum pressure value in order to detect if the XL capillary (high flow,

capillary clogged

3000 sccm) is blocked. If the value is fallen short of, the system issues warning 550.

(high flow)

Error message 551 is output with strong lower deviation.
100 ... 300 mbar

Control unit

Settings > Set up > Operation modes > Sniff > Capillary > Blocked
XL > Pressure capillary blocked XL

LD protocol

Command 455

ASCII protocol

Command *CONFig:PRESSXLLow

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Pressure value XLYou set a maximum pressure value in order to detect a disruption in the XL capillary

capillary broken (high(high flow, 3000 sccm). If the value is exceeded, the system issues warning 552.

flow)

200 ... 600 mbar

Control unit

Settings > Set up > Operation modes > Sniff > Capillary > Broken
XL > Pressure capillary broken XL

Select flow

LD protocol

Command 456

ASCII protocol

Command *CONFig:PRESSXLHigh

Select low flow or high flow. Comment: The selection can also be made with the rightsniffer key or assigned to one of the favorite keys of the control unit.
Small (low flow)
Large (high flow)

Control unit

Settings > Configuration > Operating Mode > Flow > Flow Control
or Functions > Flow > Flow Control

LD protocol

Command 229

ASCII protocol

Command *CONFig:Highflow

6.2.7 Operator types and authorizations
There are four different operator types that are distinguished by different
authorizations. The integrator is registered ex works.
Additional operators can be registered. The following table shows options forindividual operator types to register new operator types.
Operator registration
ViewerOperator

Supervisor

Integrator-

Operator

Supervisor

Integrator

ViewerOperator

Supervisor

ViewerOperator
Viewer

For the types "Integrator", "Supervisor" and "Operator", a four-digit PIN must be
assigned during registration (0000 ... 9999). "0000" is assigned to all operators ex
works.
If an operator keeps the pin "0000", this operator will always be registered is during
the start up of the system (without PIN query).
A key-operated switch can be used in addition to a PIN if an I/O module is connected.
The key-operated switch is connected to the I/O module via three digital inputs (seeoperating instructions of the LDS3000).
The following table shows the authorizations of individual operator types.

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Operation | 6

Function

ViewerOperator

Supervisor

Integrator

Changing parameters

-

x

x

x

Changing the display

-

x

x

x

-

-

-

x

-

-

-

x

of error information
Calling up factory
settings
Entering
maintenance history
The menu "Service" is accessible only to INFICON service staff.
Display error

The type of error information can be set differently for each operator type. The

information

Integrator always receives the complete information.
Number: Message number
text: Brief description
Info: Expanded message information• Only numbers• Number and text
• Number, text and info
Control unit

Main Menu > Functions > Data >Parameter > Error info Viewer (Operator,
Supervisor)

6.2.7.1 Logging out the operator
The operator activates access level "Viewer" to log out.
"Access Ctrl > Viewer"

6.2.8 Setting the audio alarm
WARNING
Damage to hearing due to loud audio
The alarm level of the device can exceed 85 dB(A).
► Set the volume up to a maximum of "12” (XL3000flex).
► Use suitable hearing protection at volume settings above "12".
► With the XL3000flexRC, the actual volume depends on what you plug into the
CU1000's headphone jack.
Volume of the headphones or active speaker--- No sound

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6 | Operation

INFICON

Proportional: The frequency of the audible signal is proportional to the bar graphdisplay or diagram height. The frequency range is 300Hz to 3300Hz.
Setpoint: The pitch is proportional to the leak rate. The signal sounds if the leak rate
exceeds the selected trigger value.
Pinpoint: The sound of the acoustic signal changes its frequency within a specificrange of leak rates. Range: A decade below the selected trigger threshold up to one
decade above. The sound keeps at a constant low and a constant high frequency
below and above this range, respectively.
Trigger: If the selected trigger threshold is exceeded, a two-pitch signal sounds.

Control unit

Main menu > Settings > Set up > Control unit > Audio > Audio
alarm mode

Behavior with warnings or error messages: If the touch screen shows a warning or
an error, then a two-pitch signal sounds simultaneously.

6.2.9 Cathode Selection
Selecting a cathodeThe mass spectrometer includes two cathodes. In the factory setting the device uses
cathode 1. If it is defective, the device automatically switches to the other cathode.
With this setting it is possible to select a certain cathode.
0

CAT1

1

CAT2

2

Auto Cat1 (automatic switching to cathode 2, factory setting)3

Auto Cat2 (automatic switching to cathode 1)

4

OFFControl unit

Main menu > Settings > Set up > MS module > Ion source >Cathode selection

LD protocol

530

ASCII protocol*CONFig:CAThode *STATus:CAThode6.2.10 Changing the display of the axes
The touchscreen grays out the parameters if• the user is not authorized to modify the values,• the older version of the software run by mass spectrometer module LDS3000 does
not support this parameter.
Scaling of the
Q(t)axis

Linear or logarithmic
Lin.
Log.

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Operation | 6

Control unit

Main menu > Display > Q(t) axis > Linear or logarithmic

Number of decades with logarithmic view
1
2
3
4

Control unit

Main menu > Display > Q(t) axis > Decades

Autoscale
Off
On

Control unit
Scaling of the time
axis

Main menu > Display > Q(t) axis > Automatic scaling

Scaling of the time axis
15 s

240 s

30 s

480 s

60 s

960 s

120 s

Control unit

Display > Time axis > Time axis scale

6.2.11 Changing the display of measured values
Measured value
display

Type of graphic display
Line graphBar graph

Control unit

Main menu > Display > Measurement display > Measured
view

Numeric representation of the measurements
Off
On

Control unit

Main menu > Display > Measurement display > Measured
view

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6.2.12 Displaying Calibration Instructions
Suppress or allow the calibration note with the following content:• Leak rate of the applied calibration leak
• No calibration should take place during the first 20 mins
OFF (suppressed)
ON (allowed)

Control unit

Main menu > Settings > Set up > Control unit > Messages >Displaying Calibration Instructions

6.2.13 Show calibration request
The calibration request can be allowed or suppressed.
OFF (suppressed)
ON (allowed)

Control unit

Settings > Set up > Control unit > Messages > Showcalibration request

6.2.14 Show warnings
Warnings and error messages can be displayed on the touch screen.
Off
On

Control unit

Main menu > Settings > Set up > Control unit > Messages >Show warnings

6.2.15 Automatic switch-off of the touchscreen
The touch screen can be switched off automatically after a specific time without any
operation to save energy.
30 s

10 min

1 min

30 min

2 min

1h

5 min

∞ (=never)Control unit

Main menu >Settings > Set up > Control unit > Energy >Display off after

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Operation | 6

6.2.16 Changing the display brightness
Display brightness
20 ... 100%Control unit

Main menu > Display > Brightness > Display brightness

6.2.17 Show setpoint
Selection of the trigger (leak rate threshold) displayed on the touchscreen.
1
2
3
4

Control unit

Main menu > Settings > Trigger > Trigger sel.

6.2.18 Assigning favorite buttons
The favorite buttons offer direct access to individual functions. They can be assignedwith access control "Supervisor" or higher by the user.
Favorite 1: Center button
Favorite 2: Right button
Favorite 3: Button at the bottom right of the main menu
VolumeFlow switching

Display settings

Check CAL

Start/stop

AQ Assistant (not applicable to XL3000flex!)

Measurement display Gas equivalentZERO- - - (= nonfunctional)

CAL

Control unit

Main menu > Settings > Favorites > Favorite 1 (2, 3)

6.2.19 Selecting the type of expansion module
Selecting the
expansion module

Selecting the type of module connected to the I/O connection
I/O module
Bus module

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Control unit

Main Menu > Settings > Setup > Interfaces > Device select. >Module on I/O connectionorMain Menu > Settings > Setup > Accessories > Device select. >Module on I/O connection

LD protocol–

ASCII protocol–

6.2.20 General interface settings (I/O module)
Setting the interface

Setting the protocol for the module connected to the I/O connection. This setting can

protocolbe overwritten with the DIP switch on the IO1000.
LD
ASCII
BinaryLDS1000

Control unit

Settings > Set up > Interfaces > Protocol > I/O module protocol

LD protocol

2593

ASCII protocol*CONFig:RS232

6.2.21 Assigning analog outputs of the I/O module
The analog outputs of I/O module IO1000 can with assigned with different
measurement value displays.
Possible functions: see the following table

Control unit

Main Menu > Settings > Set up > Interfaces > I/O module >Analog outp. > Config. Analog outputs 1/2

LD protocol

Commands 222, 223, 224

ASCII protocol

Command *CONFig:RECorder:LINK1Command *CONFig:RECorder:LINK2Command *CONFig:RECorder:SCALE
Command *CONFig:RECorder:UPPEREXP

Limit values can be defined for the output voltages.
SNIF:

Min. 1 x 10-9...1 x 10-1 mbar l/s
Max. 1 x 10-8...1 x 10-1 mbar l/s

Control unit

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Main Menu > Settings > Set up > Interfaces > LR limits

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Operation | 6

LD protocol

Command 227 (Snif)

ASCII protocol

Command *CONFig:LIMITS:SNIF

Functions, assignment of analog outputs:
OffThe analog outputs are switched off(Output voltage = 0 V).

Pressure p1 / Pressure p2

1 ... 10 V; 0.5 V / decade;
1 V = 1 x 10-3 mbar

Leak rate mantissa

1 ... 10 V; linear; in the selected unit

Useful only if the other analog
output is assigned "Leak rate
exponent".

Leak rate exponent

1 ... 10 V; 0.5 V / decade;

Useful only if the other analog

Step function;

output is assigned “Leak rate

1 V = 1 x 10-12; in selected unit
Linear leak rate

mantissa” or “Leak rate ma. Hys."
is occupied.

x ... 10 V; linear;in the selected unit

The upper limit (= 10 V) is set via the parameter "Upper limit exponent". The lower value is always 0 (leakrate), which corresponds to 0 V output voltage. The exponent of the upper limit can be set in entire decades,such as 1 x 10-4 mbar l/s.
Settings > Set up > Interfaces > I/O module > Analog scale > AO exponent upper limit.
This setting is for both analog outputs, if an appropriate output function is selected. Depending on the selectedleak rate unit there is a different absolute limit.
The selected range can be additionally narrowed by the limits, which is valid for all interfaces, see above.
Leak rate log.

x ... 10 V; logarithmic;
in the selected unit

The upper limit (= 10 V) and the scale (V / decades) are set via the parameters "Upper limit exponent" and"Scale for leak rate". For example:
Upper limit set to 1 x 10-5 mbar l/s (= 10 V). Scale set to 5 V / decade. Lower limit is at 1 x 10-7 mbar l/s (= 0 V).
The logarithmic output function of both the slope in V / decade as well as the upper limit (10 V limit) can be set.
This results in the minimum displayable value. The following slopes are available: 0.5, 1, 2, 2.5, 3, 5, 10 V/The
higher the selected slope value, the smaller the displayable area. The logarithmic settings are the most usefulwhen several decades can be displayed, so a setting of <10 V / decade. The upper limit is the same for both
analog outputs. In both of the following figures the 1 V / decade and 5 V / decade with different upper limit
settings are exemplified. Depending on the selected leak rate unit there is a different absolute limit. The
selected range can be additionally narrowed by the limits, which is valid for all interfaces, see above.
Set by interface

The output voltage can be specified for tests with the LD log command
221.

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6 | Operation

Leak rate Ma. Hys.

INFICON

0.7 ... 10 V; linear;

Useful only if the other analog output

in the selected unit

is assigned "Leak rate exponent".
Through an overlap of the mantissa in
the range 0.7 to 1.0, a constantjumping between two decades isprevented. 0.7 V corresponds to aleak rate of 0.7 x 10-x. 9.9 V
corresponds to a leak rate of 9.9 x 10x.

Pressure p1 (1 V / Dec.)/

1 ... 10 V; 1 V / decade;Pressure p2 (1 V / Dec.)

2.5 V = 1 x 10-3 mbar;
8.5 V = 1000 mbar

Leak rate log. H./

Special function. Use only on

Leak rate exp. Inv.

the recommendation of
INFICON.

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Operation | 6

6.2.22 Assigning the digital inputs of the I/O module
The digital inputs PLC-IN 1 ... The available functions can be assigned in any way
necessary to the 10 I/O module.
– Active signal: typically 24 V
– Inactive signal: typically 0 V.
The 24V output of the I/O module can be used as an active signal.
Every function can be inverted.
Possible functions: see the following table
Control unit

Settings > Set up > Interfaces > I/O module > Digital inputs >Configuration PLC Input

Key-operated switch

LD protocol

Command 438

ASCII protocol*CONFig:PLCINLINK:1 (2 ... 10)

An external key switch with up to three switching outputs can be connected via three
PLC inputs. The key switch can be used to select the access level of the operator of
the control unit.
Button 1 - Operator
Button 2 - Supervisor
Button 3 - Integrator
Example for a suitable key switch: Hopt+Schuler, No. 444-05
Functions, assignment of digital inputs:

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6 | Operation

INFICON

Function

Flank/state:

Description

No function–

No function

CAL dynam.

inactive→

Start external dynamic calibration.

active:Apply value for background and finish calibration.

active→inactive:
CAL external

inactive→

Start external calibration.

active:Apply value for background and finish calibration.

active→inactive:
SNIF/VAC

inactive→

Enable sniffer mode.

active:
Start

STOP

ZERO

inactive→

Switch to Meas. (ZERO is possible, all trigger outputs switch depending

active:on the leak rate.)

inactive→

Switch to Standby. (ZERO is not possible, all trigger outputs will return

active:"Leak rate threshold value exceeded".)inactive→

Switch ZERO on.

active:Switch ZERO off.

active→inactive:
ZERO pulse

inactive→

Switching ZERO on or off.

active:Deleteinactive→

Erase warning or error message / cancel calibration.

active:Gas ballast

inactive→Open gas ballast valve. In the XL3000flex without function.

active:Close gas ballast valve unless always open.

active→inactive:
Selection dyn/inactive→

norm

active:External calibration mode with activation of digital input "CAL":

External dynamic calibration (without auto tune, allowing for theactive→measuring times and pump cycle times set via the digital inputs)

inactive:

External normal calibration (with auto tune, not considering the systemspecific measuring times and pump cycle times)

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Operation | 6

Function

Flank/state:

Description

Start / Stop

inactive→

Switch to Meas. (ZERO is possible, all trigger outputs switch depending

active:on the leak rate.)

Switch to Standby. (ZERO is not possible, all trigger outputs will return
active→"Fail".)

inactive:
Key 1

active:User "Operator"

Key 2

active:User "Supervisor"

Key 3

active:User "Integrator"

CAL

inactive→

When set to Meas, the device will start an external calibration.

active:ZERO update

inactive→

A new zero word is formed.

active:XL flow

inactive→

The XL flow is turned on with the XL Adapter.

active:The XL flow is turned off with the XL Adapter.

active→inactive:
CAL Machinactive→

Start machine factor calibration

active:Internal PROOF inactive→

Start the internal Proof function. In the XL3000flex without function.

active:External

inactive→

PROOF

active:START / STOP inactive→

Start the external Proof function.

Activate Start or Stop.

impulseactive:ZERO update

inactive→

Update or switch on ZERO

active:No function

active→inactive:
Flowinactive→

Switch flow of SL3000XL to 3000 sccm (XL adapter)

active:Switch flow of SL3000XL to 300 sccm (XL adapter)

active→inactive:
CAL machine

inactive→

Determining the machine factor or of the sniff factor

active:External CAL

inactive→

check

active:Check calibration with external calibration leak

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Function

Flank/state:

Description

Start / Stop

inactive→

Switching between measuring operation and standby

impulseactive:Mass 2 / Mass

inactive→

Activate mass 4

4active:Activate mass 2

active→inactive:
Photo

inactive→

Sniffer tip at calibration leak, calibration starts.

interrupter

active:Sniffer tip has been removed.

active→inactive:

6.2.23 Assigning the digital outputs of the I/O module
The digital outputs PLC-OUT 1 ... The available functions can be assigned in any
way necessary to the 8 I/O module.
Every function can be inverted.
Possible functions: see the following table

Control unit

Settings > Set up > Interfaces > I/O module > Digital outputs >Configuration PLC Output

LD protocol

Command 263

ASCII protocol*CONFig:PLCOUTLINK:1 (2 ... 8)

Functions, assignment of digital outputs:
Function

State:

Description

Open

open:

always open

Trigger 1

closed:Value exceeded leak rate threshold Trigger 1

open:

Value fell below leak rate threshold Trigger 1

closed:Value exceeded leak rate threshold Trigger 2

open:

Value fell below leak rate threshold Trigger 2

closed:Value exceeded leak rate threshold Trigger 3

open:

Value fell below leak rate threshold Trigger 3

closed:Value exceeded leak rate threshold Trigger 4

open:

Value fell below leak rate threshold Trigger 4

closed:Emission switched on, calibration process inactive, no error

open:

Emission switched off or calibration process active or error

Trigger 2

Trigger 3

Trigger 4

Ready

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Operation | 6

Function

State:

Description

Warningclosed:Warning

open:

no warning

closed:

Error

open:

no errorclosed:Device is to be calibrated.

open:

Device is not to be calibrated.

Error

CAL active

CAL request closed:

and no external calibration: Calibration request (with temperature change from
5°C or 30 minutes after the start-up or if default rotation speed was changed)

closed:and external calibration or "CAL check": Request "Open or close external
calibration leak"open:
no request
Run-upclosed:Run-upopen:

no run-up

ZERO active closed:

ZERO switched on

open:

ZERO switched off

Emission on closed:

Emission switched on

open:

Emission switched off

closed:Measuring (ZERO is possible, all trigger outputs switch depending on the leak

Measurerate.)
open:

Standby or emission disabled (ZERO is not possible, all trigger outputs will
return "Leak rate threshold value exceeded".)Standbyclosed:Standby (ZERO is not possible, all trigger outputs will return “Leak rate
threshold value exceeded”.)

open:

Measuring (ZERO is possible, all trigger outputs switch depending on the leakrate.)

SNIF

closed:

SNIF

open:

VAC

Error orclosed:Error or warning

warning

open:

No error or warning

Gas ballast

closed:Gas ballast is active

open:

Gas ballast is inactive

Calibration

closed:calibration leak is active

leak open

open:

calibration leak is inactive

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Function

State:

Description

CAL stableclosed:Calibration completed with calibration leak (see "Time and general

open:

preferences [} 58]")
Assignment not stable or calibration is inactive

Cathode 2

closed:Cathode 2 is active

open:

Cathode 1 is active

6.2.24 Settings for bus module BM1000
Address of bus

Setting the bus module address. (Node address with Profibus, MACID withmoduleDeviceNet)
0 ... 255

Control unit

Settings > Set up > Interfaces > Bus module > Address

LD protocol

326

ASCII protocol–

6.2.25 Operation mode “Sniffing”
The device has the sniffer mode with a high flow rate.
For the XL3000flex , only this operation mode makes sense.
Select operation mode0

(Not applicable for XL3000flex!)

1(Not applicable for XL3000flex!)

2

Operation mode XL sniffer adapter

Control unit

Sniffer mode:
Main Menu > Functions > Start/Stop

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LD protocol

Command 401

ASCII protocol

Command *CONFig:MODE

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Operation | 6

6.3 Settings for the measurements
6.3.1 Select gas type (mass)
The machine, calibration and sniff factor are dependent on the configured mass andare saved in the mass spectrometer module.
2

H2 (Hydrogen, forming gas)3

3

He or deuterated hydrogen (HD)44

He (Helium) (factory setting)Control unit

Main menu > Settings > Mass

LD protocol

Command 506 with value 2 (3, 4)

ASCII protocol

Command *CONFig:MASS 2 (3, 4)

6.3.2 Display equivalence leak rate for other gas
If you measure with the test gases helium or hydrogen, but want to display anothergas with its leak rate, use a correction factor for the test gas used.

1

2
Fig. 3: Measurement screen with displayed equivalence leak rate and configured favorites key

1 Display of gas name and equivalence factor
2 Favorites key for fast configuration of "gas equivalent selection" after set up,
see "Assigning favorite buttons [} 43]"

You have a choice of two methods:

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6 | Operation

INFICON• To conveniently set the correction factor, use the "Gas equivalent selection[} 54]". There, the correction factor can be selected from a self-defined list, see"Configure gas list [} 54]", or switched back to the tracer gas.
• Alternatively, it is possible to calculate and configure the correction factor. For
information on calculation, see "Calculate equivalence factor [} 55]". For
information on configuring the device, see "Set equivalence factor and molar mass[} 56]".

6.3.2.1 Gas equivalent selection
1

Control unit: Settings > Set up > Operation modes > Equivalence leak rate >Gas equi.".

2

In the window "Gas equivalent selection", you can respond to different
situations:ð If the desired gas equivalent is already stored (numbers 1 to 4), select thedesired gas equivalent number and confirm with "OK". The gas name and theequivalence factor of this gas equivalent are then displayed at the top left inthe measuring window. You can perform measurement.
ð If the desired gas equivalent is not stored, it must be configured, see"Configure gas list [} 54]".
ð If you do not find a suitable entry in the 4 gas equivalents and also do notwant to change these, you can calculate the correction factor as analternative. In the window "Gas equivalent selection" select the entry "Userdefined" and configure the correction factor, see "Set equivalence factor andmolar mass [} 56]".
ð If you want to switch from the display of the gas equivalent in the measuringwindow back to the measurement value of the measuring gas, select "Switchoff" and confirm with "OK".

The options "Switch off" and "Gas equivalent no. 1...4" overwrite parameters, see "Setequivalence factor and molar mass [} 56]".
If you select the option "User-defined", parameters then have to be configured, see"Set equivalence factor and molar mass [} 56]".

6.3.2.2 Configure gas list
You can predefine up to 4 equivalence gases and assign names to them. The
equivalence gases can then be selected in the gas equivalent selection, see "Gasequivalent selection [} 54]".
1

Control unit: Settings > Set up > Operation modes > Equivalence leak rate >Configure gas list2

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Select one of the numbers 1 to 4.

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Operation | 6

ð A set of parameters is displayed for each stored gas. If there is an unusedentry, "No Entry" is displayed.
3

Press the button "Edit".
ð If you want to detect one of the gases from the stored gas library, press thedesired entry. See also "Gas library [} 93]".
ð If the desired gas is not stored, scroll to the end of the gas library and select"User-defined gas". Then, assign a name of your choice in the window"Equivalence gas name" and confirm your choice. Then enter the molar mass
and viscosity factor of the equivalence gas. For all gases that are notavailable in the gas library, please feel free to contact INFICON.

4Make your customer-specific entries in the following windows, which arebrought up by the assistant, first "Absolute pressure equivalence gas".
ð Corresponds to the absolute pressure of the equivalence gas in the test
object in bar.

5

Window "Measuring mass".
ð This is the mass of the tracer gas (helium, mass 3 or hydrogen)

6

Window "Percentage of measuring gas".
ð This is the gas proportion of the tracer gas in percent, e.g. for forming gas(95/5) it would be 5%.

7

Window "Absolute pressure measuring gas".
ð Corresponds to the absolute pressure of the tracer gas in the test object inbar.

ExampleAn air conditioning system is to be checked for leaks. The system is first filled with 2
bar (absolute) pure helium and checked for leaks. Later the plant will be filled with
R134a. The operating pressure is 15 bar (absolute).
This results in the following values for the above-specified parameters:
Absolute pressure equivalence gas = 15.0
Measuring mass = 4
Percentage of measuring gas = 100.0
Absolute pressure measuring gas = 2.0

6.3.2.3 Calculate equivalence factor
The equivalence factor is not calculated by the software of the device. Calculate theequivalence factor using the following formula:

Dynamic viscosity of test gas (helium or H2)

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Dynamic viscosity of the equivalent gas
Absolute pressure of the test gas in the test object in bar
Absolute pressure of the equivalent gas in the test object in bar

For example

An air conditioning system is to be checked for leaks.
The system is first filled with 2 bar (absolute) helium and checked for leaks. Later theplant will be filled with R134a. The operating pressure is 15 bar (absolute).
The dynamic viscosity of helium is 19.62 µPa*s.
The dynamic viscosity of R134a is 11.49 µPa*s.
In order to obtain an R134a equivalent leak rate display during the helium leakdetection, the following equivalence factor must be entered:

6.3.2.4 Set equivalence factor and molar massü The equivalence factor is known. See also "Calculate equivalence factor [} 55]".
ü The test gas used is specified (hydrogen or helium, mass 2, 3 or 4).
ü The molar mass of the equivalence gas you want to display is known.
1

Control unit: Settings > Set up > Operation modes > Equivalence rate2

“Gas factor” button
ð (LD protocol: Command 469)

3

Select "Mass 2", "Mass 3" or "Mass 4" according to your test gas.
ð If the test gas is set to helium, the window "Equivalent Gas Factor He" opens.

4

Set the equivalence gas factor. In the example (see “Calculate equivalence
factor [} 55]“) for 127:

5

Control unit: Settings > Set up > Operation modes > Equivalence rate

6

“Molar mass" button
ð (LD protocol: Command “470”)7

Select "Mass 2", "Mass 3" or "Mass 4" to match your test gas as describedabove.
ð If the test gas is set to helium, the window "Molar mass equivalent gas He"
opens.

8

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Set your molar mass. In the example for 102:

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Operation | 6ðIf the equivalence factor is not equal to 1 or the molar mass is not set to factory
settings, the equivalence factor is displayed both on the calibration result and on
the measurement screen.

Fig. 4: Top left: Display of Molar Mass (102) and Equivalence Factor (127)6.3.3 Setting setpoints
You can set the leak rate for the setpoint to 1, 2, 3 and 4 separately.
When the setpoints are exceeded:• If the setpoint 1 or 2 is exceeded, the measurement line in the measurement
window changes color.
• The setpoint relay of the digital output switches, see also "Assigning the digital
outputs of the I/O module [} 50]" or the interface description.
Also setpoint 1 defines the trigger point for the different alarms, see also "Setting theaudio alarm [} 39]".
ü

Operator or Supervisor rights
1> Trigger

2

Adjust.

3

Save

.

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6.3.4 Calibrating the device
6.3.4.1 Time and general preferences
NOTICE
Incorrect calibration because of operating temperature that is too low
If the instrument is calibrated immediately after power-on, it may provide incorrect
measurement results.
► For optimum accuracy the device should have been turned on at least 20 minutes
previously.
The device only needs to be calibrated once per shift for the desired gas. Thereafter
you can switch between the different flows without re-calibrating.
Calibration is also required after the following actions:• Sniffer line replacement• Filter change of the sniffer line
• Prompt for calibration by the system

Switching off the

The device tests the installed preamplifier during calibration. You can switch off ofpreamplifier test

the amplifier test. This increases the speed of the calibration, but reliability drops off.
0

OFF

1

ON

Control unit

Main Menu > Settings > Set-up > MS-module > Preamplifier> Test > Preamplifier test with CAL

LD protocol

Command 370

ASCII protocol

Command *CONFig:AMPTest (ON,OFF)

Enabling calibration

If Calibration request is enabled, the device will prompt the operator to perform arequestcalibration 30 minutes after it has been switched on and in case of temperaturechanges greater than 5°C.
0

OFF

1

ON

Control unit

Main Menu > Functions > CAL > Settings > CAL request. >Calibration requestor

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Operation | 6

Main Menu > Settings > Set-up> CAL request. > Calibration
requestLD protocol

Command 419

ASCII protocol*CONFig:CALREQ (ON,OFF)

Calibration warning

The warning message Wrn650 "Calibration within the first 20 minutes is not

Wrn650recommended" can be allowed or suppressed.
0

OFF (suppressed)1

ON (allowed)

Control unit

Functions > CAL > Settings > CAL request. > Calibration
warning W650
or
Settings > Set-up> CAL request. > Calibration warning
W650

LD protocol

Command 429

ASCII protocol*CONFig:CALWarn ON (OFF)

6.3.4.2 External Calibration Configuration and Start
Prerequisite for the calibration with the internal calibration leak is the one-time entry of
the leak rate of the calibration leak.
In Sniffer mode, sniffing with the sniffer line is always performed on the open
calibration leak.
Leak rate of external

Define the leak rate of the calibration leak you wish to use during calibration.

calibration leakCalibration will not be possible unless you enter the value here.

sniffing

A specific leak rate must be set for each gas (mass).

Control unit

Main Menu > Settings > Set up > Operation modes > Sniffing> Ext. calibration leak > Mass 2 (3, 4)orMain menu > Functions > CAL > Settings > Ext. calibration
leak (for current mass in selected unit)

LD protocol

Command 392

ASCII protocol

Command *CONFig:CALleak:EXTSniff (for current mass indevice selected unit)► LD and ASCII protocol: The status must be queried via: Command 260 or*STATus:CAL

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1

Start calibration.

2

Wait until leak rate signal is tuned and stable.

3

Start calibration:
Control unit: Features > CAL > Extern
LD protocol: 4, Parameter 1
ASCII protocol: *CAL:EXT
IO1000: see the figure below.
ð Request to "close calibration leak"4

Sniffer mode: Remove sniffer line from calibration leak.
ð Leak rate signal decreases.

5

Confirm measured background value is stable:
Control unit: "OK"LD protocol: 11, Parameter 1
ASCII protocol: *CAL:CLOSEDIO1000 see the figure below.

ð

Calibration is completed if:
Control unit: Old and new calibration factor are displayed
LD protocol LD instruction 260 provides 0 (READY)ASCII protocol: Command *STATus:CAL? provides IDLE
IO1000 see the figure below.

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Operation | 6

Fig. 5: External calibration with IO1000 using the example of sniffer line SL3000XL, descriptionof PLC inputs and outputs: "Assigning analog outputs of the I/O module [} 44]"

6.3.4.3 Check the calibration
To check whether a re-calibration is necessary, check the already existing.

6.3.4.4 Calibration using the external calibration leak test
► LD and ASCII protocol: The status must be queried via: Command 260 or*STATus:CAL
1

Hold the sniffer line to the test leak.

2

Wait until leak rate signal is tuned and stable.

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3

Start test:
Control unit: Functions > CAL > Test ext.
LD protocol: 4, Parameter 5
ASCII protocol: *CAL:PROOFEXT
IO1000 compare figure in "External Calibration Configuration and Start".
ð Request to "close calibration leak"4

Sniffer mode: Remove sniffer line from calibration leak.
ð Leak rate signal decreases.

5

Confirm measured background value is stable:
Control unit: "OK"LD protocol: 11, Parameter 1
ASCII protocol: *CAL:CLOSEDIO1000 compare figure in "External Calibration Configuration and Start".

ð

Test is completed if:
Control unit: Result is displayed
LD protocol: As with the other steps, the status must be queried
ASCII protocol: As with the other steps, the status must be queried
IO1000 compare figure in "External Calibration Configuration and Start".

6.3.4.5 External calibration with sniffer line SL3000XL
Low flow and high flow must be calibrated separately.
For calibration we recommend our test leak with catalogue number 12322 for forming
gas applications or 12237 for helium applications.
To ensure optimum calibration, the calibration leak must meet the following
requirements:

For calibration at Low-flow:• Helium: Leak rate > 1 x 10-5 mbar l/s• 100 % H2: Leak rate > 1 x 10-4 mbar l/s• Forming gas (95/5): Leak rate > 2 x 10-3 mbar l/s

For calibration at High-flow:• Helium: Leak rate > 1 x 10-4 mbar l/s• 100 % H2: Leak rate > 1 x 10-3 mbar l/s• Forming gas (95/5): Leak rate > 2 x 10-2 mbar l/s

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Operation | 6

6.3.4.6 Automate external calibration with CalMate (optional)
WARNING
Danger to pacemaker wearers from magnets
The calibration adapter contains magnets with which it adheres to the calibration leak.
► If you wear a pacemaker, do not install it yourself.
► If you wear a pacemaker, always maintain a distance of at least 10 cm from thecalibration adapter when operating the device.
In sniffer mode, it is possible to automate calibrations with an external calibration leak.

ü The CalMate calibration adapter is mounted on an external INFICON sniffer
calibration leak so that the opening in the adapter is directly above the outlet of thecalibration leak.
ü The calibration adapter is connected to the leak detector by cable. For further
details, refer to the "CalMate Calibration Adapter for Test Leaks" operating
instructions.
ü If there is no separate interface on the back of the XL3000flex for connecting theconnection cable, you have established the connection via the IO1000 module. See
also "Device setup [} 13]".
ü Using the CalMate on the XL3000flex requires a basic unit software version of
V2.74 or higher.
ü In the sniffer leak detector, the gas type (mass) and leak rate of the external
calibration leak are set.
1

Start the calibration check in the XL3000flex by inserting the sniffer tip into thecalibration port on the CalMate.
ð A light barrier in the CalMate adapter detects when a sniffer tip is held in thecalibration opening.
ð If a significant error is detected during this check, the leak detector
recommends another calibration.

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If you want to perform a calibration, insert the sniffer tip into the calibration
opening again and then immediately press the right button on the sniffer line.
ð Otherwise the calibration would only be checked again.

Change settings
The aforementioned behavior can be changed by configuring the "CalMate mode" inthe menu "Main menu > Settings > Set up > Accessories > CalMate". You have a
choice of 3 options there:
0 = PROOF / CAL
Inserting the sniffer tip into the calibration opening starts the calibration check.
Pressing the right-hand button of the sniffer line switches to calibration (factory
setting).
1 = CAL only
Inserting the sniffer tip into the calibration opening starts the calibration. It is notpossible to check the calibration.
2 = PROOF only
Inserting the sniffer tip into the calibration opening starts the calibration check. It is notpossible to switch to calibration.

6.3.4.7 Entering the calibration factor
The calibration is usually determined by the appropriate calibration routine. Therefore,
it is usually not necessary to adjust the calibration factor manually.
An incorrectly set calibration inevitably leads to wrong leak rate indicator!

6.3.4.8 Calibration factor sniffing
Entry of the calibration factors for masses
2, 3, 4 in low flow and in high flow.
The values will be overwritten during thenext calibration.
"High Flow-" or XL settings are available
only in operation mode "XL Sniffer
Adapter".
The calibration factors are managed
separately to earth and to "High Flow"and "Low Flow".
0.01 … 100
Control unit

Main Menu > Settings > Set up > Operation modes > SNIF >Calibration factor
Mass

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Operation | 6

2

H2

3

M3

4

He

2XL

XL H2

3XL

XL M3

4XL

XL He

LD protocol

Commands 519, 521

ASCII protocol

Command *FACtor:CALSniff or *FACtor:CALSXL for thecurrent mass

6.3.5 Suppressing gas backgrounds with "ZERO" functions
Unwanted sample gases can be suppressed with ZERO. If ZERO is enabled, thecurrently measured leak rate value will be interpreted as carrier gas and subtracted
from all subsequently measured values. The background value suppressed by ZEROis adjusted automatically if the background changes inside the device. The
background value is automatically adjusted depending on the set ZERO time, except
for filter setting I•CAL, see "Measurement result display with signal filters [} 67]".
Activating anddeactivating ZERO

Setting ZERO mode

ZERO aktivate/deaktivate
0

On

1

Off

Control unit

Main menu > Function > ZERO > ZEROLD protocol

Command 6

ASCII protocol

Command ZERO

Specified the level of the helium background suppressed by ZERO (not with filter
I•CAL).
0

all decades

1

1 – 2 decades2

2 – 3 decades

3

2 decades4

3 – 4 decades

5

19/20 of the tracer gas are suppressed

Control unit

Main Menu > Settings > ZERO/filter > ZERO > ZERO mode

LD protocol

Command 410

ASCII protocol

Command *CONFig:DECADEZero

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Deactivating theDeactivation of the ZERO-key (ZERO-alignment) prevents that the measurement isZERO key on theinfluenced inadvertently.

sniffer

0

On

1

Off

Control unit

Main Menu > Settings > Setup > Modes > Sniff > Sniffer > Button> ZERO at startup

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LD protocol

Command 412

ASCII protocol

Command *CONFig:BUTSniffer

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Operation | 6

6.4 Measuring
ü The sniffer line SL3000XL is optionally connected to the rear side of the device, see
Device setup [} 13]".
ü Possible alternatives to the operating possibilities on the device are set up(optional):
I/O-Modul or Bus-Modul, see “Accessories [} 101]“.
1

Switch on the leak detector via the power supply switch.
ð After start-up, the device is ready for operation; no special start procedure formeasuring is required.

2

Make sure that the correct basic settings and the settings for the current
measurement are carried out, see “Basic settings [} 33]“ and “Settings for themeasurements [} 53]“.

3

Make sure that calibration takes place daily.
ð When performing a calibration, note the 20 minute warm-up time, see“Calibrating the device [} 58]“.

4

To measure, hold the sniffer tip close to the possible leak or run it along a weld,
for example.
ð The tip must touch the test object.
ð If the detection limit has deteriorated, you can detect leaks at a greater
distance (high flow) from the suspected leak and switch to low flow using theright button of the sniffer handle for more accurate location.

5

Track the measurement result either as a line or as a bar graph, see“Touchscreen elements [} 19]".

6

To measure small leak rates more clearly, use the ZERO function. To switchon, press the ZERO button on the sniffer handle for a longer period (> 5 s), seealso Operating elements on the handle [} 18]“.
ð To activate ZERO on the sniffer probe, it must be activated in the menu, seealso Suppressing gas backgrounds with "ZERO" functions [} 65]“.
ð If ZERO is switched on, you will see the text ZERO with white background in
the measurement window.

7

Record the measured values if necessary, see "Recording data [} 68]" and"Copying measurement data, deleting measurement data [} 70]".

8

Switch the instrument off.

6.5 Measurement result display with signal filters
Select signal filter

With the signal filters, the leak rate indicator regarding slope and noise behaviorcan
be influenced.
– Generally select signal filter I-Filter for the operation mode "Sniff".

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6 | Operation

INFICON– If the signal filter should simulate the time behavior of older units, then select filter"Fixed" or "2-Zone".
I•CAL

The leak rates are averaged at time intervals that are optimized
for the range of the leak rates. The algorithm used offers
excellent sensitivity and response time. Use of this setting isstrongly recommended.

fixed

The leak rates are averaged at fixed intervals of 0.2 seconds.

2-zone

The filter is compatible with LDS1000 and LDS2000. The
averaging period is switched depending on the filter leak rate
threshold.

I-Filter

Filter optimized for sniffer mode.
(Default with XL Sniffer Adapter set)

I-Filter slope

Same as I-Filter, but with additional slope suppression. The

suppress.

edge suppression corrects the measurement changes during
the warm-up phase.

Control unit

Main Menu > Settings > ZERO/Filter > Filter > Filter mode

LD protocol

Command 402

ASCII protocol

Command *CONFig:FILTER

Setting the filter leak

Leak rate background in mbar l / s for the averaging period. The averaging period israte threshold

10.24 s below this value. Above this value, the averaging period is 160 ms. Setting
applies only to filter "2-stage".
1E-11 ... 9.9E-3

Control unit

Main Menu > Settings > ZERO/Filter > Settings > Filter 2-zone

LD protocol

Command 403

ASCII protocol

Command *CONFig:LRFilter

Setting filter ZERO

Update interval for the offset value with negative leak rate signal (except for I•CAL

time

filter).
Resolution 0.1 s (50 = 5.0 s)

Control unit

Main Menu > Settings > ZERO/Filter > Settings filter > ZEROtime

LD protocol

Command 411

ASCII protocol

Command *CONFig:ZEROTIME

6.6 Recording data
The data is saved as a TXT file. Each TXT file contains the following information:

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Operation | 6• Date created• Software version• Serial number• Start time
• Time stamp (measurement indicates offset in seconds in relation to start time)• File name• Leak rate (expressed in selected unit)• Pressure p1 (expressed in selected unit)• Device status
Switching on/off

Switching data recording on/off
• Off
• On
Control unit

Main Menu > Functions > Data >Recorder > Settings > Data recording

Record intervalTime interval between data recordings• 100 ms, 200 ms, 500 ms, 1 s, 2 s, 5 sControl unit

Main Menu > Functions > Data >Recorder > Settings > Record interval

Memory location

The data stored in the control unit can be saved to a USB stick. The memory in thecontrol unit is limited to the recording of a 24-hour measurement.
• USB flash drive• Control unit
Control unit

Main Menu > Functions > Data >Recorder > Settings > Storage location

Copy data

The data stored in the control unit can be saved to a USB stick. The memory in thecontrol unit is limited to the recording of a 24-hour measurement.
• USB flash drive• Control unit
Control unit

Main Menu > Functions > Data >Recorder > Copy > Copy files

Deleting data

The data stored in the control unit can be saved to a USB stick. The memory in thecontrol unit is limited to the recording of a 24-hour measurement.
• USB flash drive• Control unit
Control unit

Main Menu > Functions > Data >Recorder > Delete > Delete files

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6.7 Copying measurement data, deletingmeasurement data
The measurement data can be saved to a USB stick, see Device setup [} 13].
• "Main Menu > Functions > Data > Recorder > Copy > Copy files"• "Main Menu > Functions > Data > Recorder > Delete > Delete files”

6.8 Updating the software
Software updates from INFICON are installed with the aid of a USB flash drive. The
update function of the device can be found under "Functions > Data > Update".
An update is possible,• if one or several updates are available on the USB-Stick, but only one update pertype at most (control unit, MSB box, I/O module),• if these parts are also connected free of disturbances and have an update
function.
The corresponding buttons in the update menu such as "Control Unit", "MSB Box",and "I/O Module" are active and can be activated individually.

NOTICE
Aborted connection
Data loss due to an aborted connection► Do not switch off the device and do not remove the USB flash drive while thesoftware is being updated!
► Switch the device off and back on after a software update has taken place.

6.8.1 Updating the software of the control unit
The software is included in two files named Handset_IFC_Vx.xx.xx.exe andHandset_IFC_Vx.xx.xx.key.
1

Copy the file into the main directory of a USB flash drive.

2

Connect the USB flash drive to the USB port on the device.

3

Select: Functions > Data > Update.
ð Do not switch off the device and do not remove the USB flash drive while thesoftware is being updated!

4

Check the version information.

5

Select the "Start" button to start the update. Do not switch off the device and do
not remove the USB flash drive while the software is being updated!

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Operation | 6

6

Follow the instructions on the touchscreen and wait until the update iscomplete.

6.8.2 Updating the software of the I/O module
The software of the I/O module can be updated from the control unit if the mass
spectrometer module has the software version "MS module 1.02" or higher.
1

Copy the file Flash_LDS3000_IO_Vxx.xx.xxx.bin into the main directory of a
USB flash drive.

2

Connect the USB flash drive to the USB port on the device.

3

Select: "Functions > Data > Update > I/O module"ð The display shows information on the current and the new software as well ason the current boot loader.

4

Check the version information.

5

Select the "Start" button to start the update.
ð Do not switch off the device and do not remove the USB flash drive while thesoftware is being updated!

6

Follow the instructions on the touchscreen and wait until the update iscomplete.
ð The following tips are shown after selecting the "Start" button on thetouchscreen:
Connect and switch on the IO1000.
Activate boot mode (switch DIP S2.3 on and off once).
When the STATUS LED flashes green, press OK.

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6 | Operation

INFICON

Fig. 6: DIP switch on the I/O module

6.9 Calling up information
Different information and states of the system can be called up with the info menu.
Measurement values• Preamplifier• Environment• TMP

Temperature• Electronic• TMP

Energy and operating• Energy values: Information on consumption values

hours• Operation hours: Display for operating hours• Supply voltages: Information on internal supply voltages• Power supply: Information on the supply voltages of the components

History• Error, error history / warning history• Calibration, calibration history

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Operation | 6• TMP error, TMP history• Warnings, active warnings• Maintenance, maintenance history
Control unit

• Version control unit: Information on the software version• Memory: Information on available memory• Settings: Control unit settings.
• Serial port wired: Information on the communication connection• Data exchange: Information on the data exchange between mass spectrometer
module and the control unit

Mass spectrometer• MSB (1): Information on the software version

module• MSB (2): Information on operating parameters• TMP controller (1): Information on the turbo molecular pump
• TMP controller (2): Information on the turbo molecular pump, continued• Ion source: Information on the ion source used
• Preamplifier: Information on the preamplifier• Preamplifier test: Information on the preamplifier test.

Interfaces• I/O module (1): Information on the software version, inputs and outputs• I/O module (2): Visualized information to the digital inputs

Fig. 7: I/O module (2): Visualized information to the digital inputs

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6 | Operation

INFICON

1

Input signal condition

2

Configured function (INV =Function is inverted)

3

Status of the function (active orinactive)• I/O module (3): Visualized information to the digital outputs

Fig. 8: Visualized information to the digital outputs

1

Configured function (INV =2

Output signal condition

Function is inverted)
3

Status of the function (active orinactive)• Bus module (1): Information on the bus module• Bus module (2): Information on the bus module, continued

6.10 Display, save, load parameters
Parameter list display

Parameters can be displayed as an alphabetical list with names and current value s.

and change

Each list entry is a button which, when pressed, will open the parameter's set-up
dialog box.
Control unit

Main Menu > List > Parameters list or:
Main Menu > Functions > Data >Parameters > List

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Operation | 6

Display list of

Parameters can be displayed as an alphabetical list with names and current change

parameter change

authorizations. Each list entry is a button which, when pressed, will change accessauthorizations

control. Changes are possible in accordance with the hierarchy of the operator.
Control unit

Main Menu > Functions > Data >Parameters > Parameter Access

Loading or saving

To save and restore the parameters of the device, you can connect a USB stick to theparameters

front of the device.
Save parameter:• Main Menu > Functions > Data > Parameters > Save
Loading parameters:• Main Menu > Functions > Data > Parameters > Load

6.11 Resetting the settings
Mass spectrometer
moduleThe settings of the mass spectrometer module can be reset to factory settings.
0

Load factory settings

10(Not applicable for XL3000flex!)

11(Not applicable for XL3000flex!)

12

Reset the settings for XL sniffer adapter mode

Control unit

Functions > Data > Parameters > Reset > MSB settings

LD protocol

Command 1161

ASCII protocol

Command *RST:FACTORY––
Command *RST:SL3000

Access controls

The authorization for changing parameters can be reset to factory setting.
Control unit

Main Menu > Functions > Data >Parameters > Reset > Parameter AccessControl unit

The control unit settings can be reset to factory settings.
Control unit

Main Menu > Functions > Data >Parameters > Reset > Control unit
settings

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7 | Warning and error messages

INFICON

7 Warning and error messages
The device is equipped with extensive self-diagnostic functions.
Error messages

Errors are events that the device cannot correct itself and that force interruption of its
operation. The error message consists of a number and a descriptive text.
After you have removed the cause of the error, start operation again with the restart
button.

Warnings

Warnings warn of device states that can impair the accuracy of measurements.
Operation of the device is not interrupted.
Confirm acknowledgment of the warning with the OK key or the right key on the sniffer
handle.
The following table displays all the warnings and error messages. It lists possible
causes for the malfunction and instructions on how to eliminate these.
Please note that work marked with an asterisk must be carried out only by service
staff that is authorized by INFICON.

Warning Error message

Error number(Wrn)

LDS1000 Binary or

LDS3000

Limit values Cause

Protocol ASCII

Error

protocol(Err)compatibil
ity mode
LDS1000/
LDS2010
1xx system error (RAM, ROM, EEPROM, clock, ...)
Wrn102

Timeout EEPROM MSB

84

43

Box (Parameter number)
Wrn104An EEPROM parameter isdefective
84

43

initializing
Wrn106

EEPROM parameter

Clock not set

Following software update or
EEPROM defective

84

43

initializing
Wrn110EEPROM on IF board or MSB

Following software update or
EEPROM defective

16

16

Jumper for clock not set, battery
drained, clock defective

Wrn122

No response from the BUS 99

99

moduleWrn123Connection to BUS moduleinterrupted

Unsupported configuration 99

99

INFICON from BM1000

The selected configuration is notsupported by the connected
INFICON BM1000-fieldbus type.

Wrn125I/O module not connected99

99

Connection to I/O moduleinterrupted

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Warning and error messages | 7

Warning Error message

Error number(Wrn)

LDS1000 Binary or

LDS3000

Limit values Cause

Protocol ASCII

Error

protocol(Err)compatibil
ity mode
LDS1000/
LDS2010
Wrn127

Wrong bootloader version

99

99

Boot loader not compatible withapplication

Err129

Incorrect device

99

99

EEPROM does not contain any(EEPROM)
Err130

Sniffer not connected

Wrn132SL3000 not supported

compatible data
99

99

The sniffer line is not connected.
Only the SL3000XL may be usedwith the XL3000flex

Wrn150Pressure sensor 2 is not––Connecting pressure sensor

connected

PSG500 to a FINE connection.

2xx operating voltage error
Wrn201

U24_MSB too low

24

120

21.6V

24V power supply packWrn202

U24_MSB too high

24

120

26.4V

24V power supply packWrn203

24V_PWR12 voltage out of 24

120

20V

Short circuit at valve 1 (calibrated

30Vleak) or valve 2 (gas ballast)

20V

Short circuit at valve 3 or valve 4

range (TL_valve/
GB_valve)
Wrn204

24V_PWR34 voltage out of 24

120

range

30V

(valve 3/4)
Wrn205

24V_PWR56 voltage out of 24

120

range (Sniff_valve/valve6)
Wrn221

Internal voltage 24V_RC

24

120

voltage out of range
Wrn222

Internal voltage 24V_IO

24

120

voltage out of range
Wrn223

Internal voltage 24V_TMP

Internal voltage 24V_1

24

120

24

120

range
Voltage +15V out of range

30V

valve 6

20V

Short circuit 24V at the control

30V

unit output

20V

Short circuit 24V at IO output

20V

Short circuit 24V of the TMP

30V(Pirani) voltage out of

Wrn240

Short circuit at valve 5 (sniff) or

30V

voltage out of range
Wrn22420V

20V

Short circuit 24V

30V

Pressure sensor PSG500 (1,2,3),
sniffer line

24

120

+15V too low, IF board or MSB
defective

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7 | Warning and error messages

INFICONWarning Error message

Error number(Wrn)

LDS1000 Binary or

LDS3000

Limit values Cause

Protocol ASCII

Error

protocol(Err)compatibil
ity mode
LDS1000/
LDS2010
Wrn241

Voltage -15V out of range

24

120

-15V too low, short circuit atpreamplifier, IF board or MSB
defective

Err242+15V or -15V voltage

24

120

+15V or -15V too low, short

shortedcircuit at preamplifier, IF board or
MSB defective

Wrn250

REF5V voltage out of

24

120

range

4.5V

+15V or 5V too low, short circuit

5.5V

at preamplifier, IF board or MSB
defective

Err252

REF5V voltage shorted

24

120

+15V or REF5V too low, shortcircuit at preamplifier, IF board or
MSB defective

3xx detection system (offset preamplifier, preamplifier test, emission, cathode test)
Wrn300

Anode voltage too low

41

132

7V < theShort circuit anode voltage,

setpoint

pressure in mass spectrometer
too high, IF board, MSB or ion
source defective

Wrn301

Anode voltage too high

40

131

7V > theMSB defective

setpoint
Wrn302

Suppressor voltage too low 39

130

297V

Short circuit suppressor, IF board
or MSB defective

Wrn303

Suppressor voltage too

38

129

363V

MSB defective

Anode-cathode voltage too 36

127

40V

Short circuit anode-cathode, IF

high
Wrn304low
Wrn305board or MSB defective

Anode-cathode voltage too 35

126

140V

MSB defective

127

40 V

The anode voltage does notdeviation

match the default value or the set

from thevalue is outside the allowable

default

setting range.

highErr306

Anode voltage faulty

36

value

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Warning and error messages | 7

Warning Error message

Error number(Wrn)

LDS1000 Binary or

LDS3000

Limit values Cause

Protocol ASCII

Error

protocol(Err)compatibil
ity mode
LDS1000/
LDS2010
Wrn310Cathode 1 is defective

45

136

Cathode defective, line tocathode interrupted, IF board or
MSB defective

Wrn311

Cathode 2 is defective

46

137

Cathode defective, line tocathode interrupted, IF board or
MSB defective

Err312

Cathode defective

47

138

Cathode defective, line tocathode interrupted, IF board or
MSB defective

Err340Emission error

44

135

< 90% of the Emission was stable previously,target value

pressure probably too high,> 110% of

message after 15s

the target
value
Wrn342

Cathodes not connected

47

138

Both cathodes defective during
self-testing after switch on orplug not connected

Wrn350Suppressor not connected

39

130

Supressor cable is not plugged inor defective during the self-test
after switching on

Wrn352

Preamplifier not connected

Preamplifier defective, cable notplugged in

Err358Preamplifier oscillates

Signal varies too much (seebetween 2 ranges

command 1120)
Preamplifier defective

Wrn359Overdriven preamplifier

31

123

Signal too large preamplifier
defective

Wrn360Preamplifier output too low 31

XL3000flex-Operating-instructions-jina83en1-10-(2307)

123<-70 mV at

Poor ion source or contaminated500 GΩ

mass spectrometer

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7 | Warning and error messages

INFICONWarning Error message

Error number(Wrn)

LDS1000 Binary or

LDS3000

Limit values Cause

Protocol ASCII

Error

protocol(Err)compatibil
ity mode
LDS1000/
LDS2010
Wrn361

Preamplifier offset too high 31

123>+/-50 mVPreamplifier defective

at 500 GΩ,>+/-10 mV
at 15 GΩ,<+/-10 mV
at 470 MΩ,<+/-9 mV at
13 MΩ
Wrn362

Preamplifier range error

31

123

Preamplifier or MSB box
defective

Wrn390500 G outside the range

31

123

450 GΩ

Preamplifier defective, error at

550 GΩ

the suppressor, IF board or MSB
defective

4xx TMP fault (also temperature)
Err400

TMP fault number

Wrn401

TMP warning number

Err402

No communication with

49

15

49

15

Cable to TMP / TMP defective, IF

TMP
Err403

TMP rotation speed too

board or MSB defective
53

142

low
Err404

TMP current consumption< 95% of the Pressure too high, TMP defective
target value

49

2

3A

too high
Err405

No TMP run-up

60

61

5 min.

Pressure too high, TMP faulty

Err410

TMP temperature too high

49

2

61°C

Cooling failed, check MSB
module operating conditions

Wrn411High TMP temperature

49

2

60°C

Cooling failed, check MSB
module operating conditions

Err420

TMP voltage too high49

2Power supply defective, TMP
defective

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Warning and error messages | 7

Warning Error message

Error number(Wrn)

LDS1000 Binary or

LDS3000

Limit values Cause

Protocol ASCII

Error

protocol(Err)compatibil
ity mode
LDS1000/
LDS2010
Wrn421

TMP voltage too low

Cable cross-section 24 V supply
for MSB modules too low, output
current 24-V power supply too
low (I <10 A), power supply
defective, TMP defective

Err422

TMP no run-up time49

2

8 min.

TMP foreline pressure too high,VV pump final pressure too high,leakage high vacuum system,
flood valve not close, TMP
bearing damage, TMP flawed

Err423

TMP pressure rise

49

2

Inrush of air, flood valve
defective or incorrectly
dimensioned

5xx Pressure and flow errors
Wrn500Pressure sensor not

58

144

0.5V

connected

Pressure sensor PSG500 P1 notconnected, IF board or MSB
defective

Wrn502Pressure sensor 2 not

Pressure sensor PSG500 P2 notconnected

connected, IF board or MSB
defective.

Wrn520Pressure too high

73

148

18 mbarPressure p1 too highWrn521Pressure rise, anode

73

148

< Setpoint -Pressure p1 too high, message

20V

after 1.4s

voltage collapse
Wrn522Pressure rise, emission

73

148

collapsed< 90% of the Emission was stable previously,target value

pressure p1 too high, message> 110% ofafter 5s

the target
value
Wrn540Pressure too low, Sniffer

63

blocked62

Sniffer flow

Sniffer clogged, sniffer valve

warning

defective,filter clogged

parameter

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7 | Warning and error messages

INFICONWarning Error message

Error number(Wrn)

LDS1000 Binary or

LDS3000

Limit values Cause

Protocol ASCII

Error

protocol(Err)compatibil
ity mode
LDS1000/
LDS2010
Err541

Sniffer blocked (p1)

62

146

Sniffer blocked, sniffer valve
defective (pressure lower thanhalf of the configured warning
value), filter clogged

Wrn542

Sniffer broken

64

147

Sniffer broken

Wrn550Pressure too low, XL

Clean or replace the high flow

Sniffer blocked

capillary of the sniffer line.
Replace soiled filter.

Wrn552XL Sniffer broken

Replace the high flow capillaryof the sniffer line.

Wrn554

XL Sniffer P2 too small

63

62

Pressure on SL3000XL too low
in High Flow.

6xx Calibration errors
Wrn600Calibration factor too low

81

153

0.01

Calibration leak or machine
factor set incorrectly

Wrn601

Calibration factor too high

81

153

10000

Calibrated leak or machine
factor set incorrectly, partial flow
factor too highWrn602

KalFaktor lower than last

81

153

calibration< 50% of the Calibrated leak, machine factor
old valueor partial flow factor haschangedWrn603

KalFaktor higher than last

81

153

calibration

Wrn604Int. Cal. not possible, lack81

> 200% ofCalibrated leak, machine factor

the old

or partial flow factor has

valuechanged153

calibration leak is not enabledof calibration leak control
Wrn605

Wrn610Difference during

Calibration leak defective orcalibration too small

signal too weak.

Machine factor too low

81

153

1.00E-04

Machine factor adjustment
inaccurate

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Warning and error messages | 7

Warning Error message

Error number(Wrn)

LDS1000 Binary or

LDS3000

Limit values Cause

Protocol ASCII

Error

protocol(Err)compatibil
ity mode
LDS1000/
LDS2010
Wrn611

Machine factor too high

81

153

1.00E+04

Machine factor adjustment
inaccurate, partial flow factor too
high

Wrn612

Machine factor lower than

81

153

last time
Wrn613

Machine factor greater< 50% of the Partial flow factor has changed
old value

81

153

than last time> 200% ofPartial flow factor has changed

the old
value

Wrn625Int. calibration leak not set

00

Leak rate of int. calibration leakis still set to factory setting

Wrn626Ext. Calibration leak not

0

0

set
Wrn630Calibration request

Leak rate of calibration leak is
still set to factory setting

00

Temperature change of 5°C,
Rotation speed was changed
since last calibration, 30-minuteswitch-on time and still nocalibration conducted

Wrn650Calibration is not

A calibration during the first 20

recommended in the firstminutes after starting (warm-up

20 minutes

phase) the leak detector is notrecommended.
The warning message can beturned off:
- LD protocol: Bef 429– ASCII: *CONFig:CALWarn(ON,OFF)Wrn670Calibration error

81

153

Since a problem has occurred
during the calibration, you haveto recalibrate.

Wrn671

Peak not found

81

153

The signal was too restless
during the peak search.
Calibration has been aborted.

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7 | Warning and error messages

INFICONWarning Error message

Error number(Wrn)

LDS1000 Binary or

LDS3000

Limit values Cause

Protocol ASCII

Error

protocol(Err)compatibil
ity mode
LDS1000/
LDS2010
Wrn680Deviation to the calibration 00

The verification of calibration

detected

has shown that you should
recalibrate.

7xx temperature errors (preamplifier, electronics)
Wrn700Preamplifier temp. too low

33

60

2°C

Temperature too low

Wrn702

Preamplifier temp. too high 32

124

60°C

Temperature too highWrn710

MSB temperature too high

54

44

58°C

Temperature too highErr711Max. MSB temperature

54

44

65°C

Temperature too high99

99

3 years

TMP maintenance necessary

99

99

exceeded
8xx not used
9xx maintenance messages (e.g. TMP)
Wrn901

Maintenance bearing/
lubricantWrn910

Maintenance diaphragm8000 hour maintenance ofpumpdiaphragm pump required

7.1 Display warnings as errors
Up to 8 arbitrary warning messages can be upgraded to error messages.
Unlike warnings, errors lead to an interruption in the operation of the device. Thus, by
upgrading warnings to errors, you can prevent an operator from ignoring thesewarnings and continuing to work with the device.

Upgrading selected warnings to errors
1"Settings > Setup > Notifications > Warning -> Error"

2

Make your settings in the "Display warning as error" window.
ð Select the desired "List entry no." from the numbers 1 - 8.
ð From the number list of warnings below, select the number that should
become an error message. If the numbers are held down longer for selection,
the number is incremented in steps of ten.
ð To change a warning that has been upgraded to an error, enter the desired
new warning number under the same "List entry no.".

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Warning and error messages | 7

ð For your overview, the text of the warning in question is displayed in the lower
part of the window.
3

Confirm with “OK.”ð Alternatively, exit the window without saving by pressing the "X" button.

Undoing the upgrading of warnings to errors
1"Settings > Setup > Notifications > Warning -> Error"

2

Make your settings in the "Display warning as error" window.
ð Select the used "List entry no." with the assigned warning number from thedigits 1 - 8.
ð Set a value below 100 in the displayed number overview of warnings. This
will cause "No entry" to be displayed.

3

Confirm with “OK.”XL3000flex-Operating-instructions-jina83en1-10-(2307)

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8 | Cleaning and maintenance

INFICON

8 Cleaning and maintenanceAll cleaning and maintenance work described here must be carried out without
opening the device!

WARNING
Life threatening hazard from electric shock
High voltages are inside the device. Touching parts where electrical voltage is present
can result in death.
► Disconnect the device from the power supply prior to any installation andmaintenance work. Ensure that the electrical supply cannot be switched back on
unintentionally.

8.1 Cleaning the housing
Wipe the housing with a soft damp cloth.
Use only water to moisten. Avoid cleaners that contain alcohol, fat or oil.

8.2 Maintenance of the XL3000flex
For your safety , we recommend to contact your INFICON Service for any
maintenance that needs to opening the device.
You can change yourself the fuses, the filter mats of the fan inlet and the filter in thesniffer tip without opening the device.

8.2.1 Change the filter mat of the fan input
Depending on the location, the filter mat on the back of the device may become dirty.
Check the filter mat periodically and change it, if the filter mat is significant dirty.
ü You have a new filter set.
1

Make sure that the device is disconnected from the power supply by pulling thepower plug securely.

2

Gently lift the lower corners of the plastic grid and remove the plastic grid withthe filter mat.

3

86 / 108

Replace the dirty filter set.

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INFICON

Cleaning and maintenance | 8

8.2.2 Replacing the fuses
DANGER
Life threatening hazard from electric shock► Disconnect the device from the power supply.
► Ensure that the electrical supply cannot be switched back on unintentionally.
1

Switch off the device and disconnect from the mains.

2

Pull the plug of the power cable out of the device.

3

The fuse holder of the device is located under a cover next to the power switch.
Carefully remove the cover with the fuses attached underneath out of thedevice.

4

Remove the fuses and check them for any damage.

5

If necessary, replace the fuses. Use only spare fuses of the same type andrating as those supplied (T6.3 A 250 V).

6

Two fuses of the same type must be used.

7

Press the fuse holder along with the fuses back into the starting position until
the cover locks into place.

8.2.3 Replacing the filter cartridge on the sniffer probe
The replacement interval depends on the ambient conditions. The filter cartridge must
generally be replaced every 500 to 1500 operating hours.
The filter cartridge is in the sniffer probe.

XL3000flex-Operating-instructions-jina83en1-10-(2307)

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8 | Cleaning and maintenance

INFICON

1
2

3
Position

Description

1

Sniffer tip

2

Cap nut3

Filter cartridge
1

Remove the sniffer probe: Release the cap nut of the sniffer probe manually orwith a screw driver (SW21).

2

Remove the old filter cartridge and insert a new filter cartridge.

3

Put the sniffer probe on the handle and tighten the cap nut manually only.

4

Check for tightness:

If no air can be drawn in, the unit signals the warning W41. If the end of the sniffer tip
is closed and the warning is not reported, the screw connection at the sniffer tip isleaking or the filter cartridge is not seated correctly.
1

Unscrew the plastic cap on the end of the filter tip.

2

Close the end of the sniffer probe with the thumb. If there is no warning, tighten
the cap nut and – if that is not successful – check the seat of the filter.

88 / 108

3

Tighten the plastic cap on the end the sniffer probe again.

4

Calibrating the device

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INFICON

Cleaning and maintenance | 8

8.2.4 Maintenance by the manufacturer
Maintenance inside the device may only be performed by the manufacturer. We
recommend having the device serviced periodically by the manufacturer's service.
For further details see "Returning the device for maintenance, repair or disposal[} 91]”.

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8 | Cleaning and maintenance

INFICON

8.2.5 Maintenance plan
Assembly

Maintenance Work

Operating hours/years (intervals are

Service

Spare part

XL3000flex

repeated)level

numberII

200003801

2000 4000 8000 16000 24000 32000
1/4
SplitFlow 80

1/2

1

2

Changing the lubricant

3

4

X3

reservoir
Change bearings and

X2

III

replace oil wickcartridge
Inspecting and

X3

II

X1

III

X

III

cleaning the fanfunction
Diaphragm

Replacing thepumpdiaphragms valves

200005414

plates and O-Rings
Leak Detection

Performing helium leak

MSB module

detection on the MSB
moduleSniffer line filters Replacing the sniffer

X3

II

521-023

I

200008670

line filters
Air filter

Replacing the air filter

X3

on housing
Explanation of the maintenance plan:• I Service level I Customer• II Service level II Customer with technical training• III Service level III Authorized INFICON service technician• X Carry out maintenance as per operating hours or duration• X1 Maintenance after operating hours, not after duration• X2 Maintenance by duration, not by operating hours• X3 Dependent on environmental influences, operating conditions, contamination
and application process

90 / 108

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INFICON

Decommissioning the measuring instrument | 9

9 Decommissioning the measuring
instrument
9.1 Disposing of the device
The device can either be disposed of by the operator or be sent to the manufacturer.
The device consists of materials that can be recycled. This option should be exercised
to prevent waste and also to protect the environment.
During disposal, observe the environmental and safety regulations of your country.
Device cannot be scrapped with the normal domestic waste.

9.2 Returning the device for maintenance, repair or
disposal
WARNING
Danger due to harmful substances
Contaminated devices could endanger health. The contamination declaration servesto protect all persons who come into contact with the device. Devices sent in without areturn number and completed contamination declaration will be returned to the senderby the manufacturer.
► Fill in the declaration of contamination completely.
1

Contact the manufacturer and send in a completed declaration of contamination
before return shipment.
ð You will then receive a return number and the shipping address.

2

Use the original packaging when returning.

3

Before shipping the instrument, attach a copy of the completed contamination
declaration to the outside of the package.

For contamination declaration see below.

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9 | Decommissioning the measuring instrument

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INFICON

XL3000flex-Operating-instructions-jina83en1-10-(2307)

INFICONGas library | 10

10 Gas library
The operating software of the device contains a list of approx. 100 gases which could
be relevant in the refrigeration industry.
The list is stored in the nonvolatile flash memory of the operating unit and can be
updated. The user can access this list while pre-defining the equivalence gases, see"Configure gas list [} 54]". The user can then select from the pre-defined gases during
gas equivalent selection, see "Gas equivalent selection [} 54]".
The library of the device has the following factory-defined content:Gas designation

Other designations Molecular mass

(max. 8 digits)

Helium viscosity

Hydrogen/mass 3(amu)

factorviscosity factor

R11

CFCl3

137.4

0.515

1.15

R12

CF2Cl2

120.9

0.591

1.319

R12B1

CF2ClBr

165.4

0.523

1.167

Halon 1211
R13

CF3Cl

104.5

0.857

1.913

R13B1

CF3Br

149

0.852

1.902

Halon 1301
R14

CF4

80

0.857

1.913

R21

CHFCl2

102.9

0.535

1.194

R22

CHF2Cl

86.5

0.632

1.411

R23

CHF3

70

0.704

1.571

R32

CH2F2

52

0.632

1.411

R41

CH3F

34

0.551

1.23

R50

CH4

16

0.556

1.241

Methane
R113

C2F3Cl3

187.4

0.484

1.08

R114

C2F4Cl2

170.9

0.545

1.217

R115

C2F5Cl

154.5

0.627

1.4

R116

C2F6

138

0.709

1.583

R123

C2HF3Cl2

152.9

0.54

1.205

R124

C2HF4Cl

136.5

0.581

1.297

R125

C2HF5

120

0.653

1.458

R134a

C2H2F4

102

0.591

1.319

R141b

C2H3FCl2

117

0.464

1.036

R142b

C2H3F2Cl

100.5

0.494

1.103

R143a

C2H3F3

84

0.561

1.252

R152a

C2H4F2

66.1

0.515

1.15

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10 | Gas library

Gas designation

INFICON

Other designations Molecular mass

(max. 8 digits)
R170

C 2H 6

Helium viscosity

Hydrogen/mass 3(amu)

factorviscosity factor

30.1

0.479

1.069

Ethane
R218

C3F8

188

0.627

1.4

R227ea

C3HF7

170

0.627

1.4

R236faC3H2F6

152

0.55

1.228

R245faC3H3F5

134

0.52

1.161

R290

C 3H 8

44.1

0.433

0.967

Propane
R356

C4H5F5

166.1

0.561

1.252

R400

Mixture of

141.6

0.571

1.275

94.4

0.607

1.355

92.8

0.612

1.366

101

0.602

1.344

101.6

0.647

1.444

94.7

0.642

1.433

92

0.642

1.433

103.3

0.647

1.444

50% R12
50% R114
R401A

Mixture of
53% R22
13% R152a
34% R124

R401B

Mixture of
61% R22
11% R152a
28% R124

R401C

Mixture of
33% R22
15% R152a
52% R124

R402A

Mixture of
38% R22
60% R125
2% R290

R402B

Mixture of
60% R22
38% R125
2% R290

R403A

Mixture of
75% R22
20% R218
5% R290

R403B

Mixture of
56% R22
39% R218
5% R290

94 / 108

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INFICONGas designation

Gas library | 10

Other designations Molecular mass

(max. 8 digits)
R404A

Mixture of

Helium viscosity

Hydrogen/mass 3(amu)

factorviscosity factor

97.6

0.607

1.355

111.9

0.622

1.388

89.9

0.566

1.263

90.1

0.637

1.422

102.9

0.647

1.444

86.2

0.627

1.4

91

0.612

1.366

83.8

0.622

1.388

82.1

0.67

1.496

87

0.602

1.344

44% R125
52% R143a
4% R134a
R405A

Mixture of
45% R22
7% R152a
5.5% 142b
42.5% RC318

R406A

Mixture of
55% R22
4% R600a
41% R142b

R407A

Mixture of
20% R32
40% R125
40% R134a

R407B

Mixture of
10% R32
70% R125
20% R134a

R407C

Mixture of
10% R32
70% R125
20% R134a

R407D

Mixture of
23% R32
25% R125
52% R134a

R407E

Mixture of
25% R32
15% R125
60% R134a

R407F

Mixture of
40% R134a
30% R125
30% R32

R408A

Mixture of
7% R125
46% R143a
47% R22

XL3000flex-Operating-instructions-jina83en1-10-(2307)

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10 | Gas library

Gas designation

INFICON

Other designations Molecular mass

(max. 8 digits)
R409A

Mixture of

Helium viscosity

Hydrogen/mass 3(amu)

factorviscosity factor

97.4

0.607

1.355

96.7

0.612

1.366

72.6

0.673

1.502

75.6

0.673

1.502

82.4

0.617

1.377

83.1

0.62

1.388

83.4

0.627

1.4

92.2

0.602

1.344

104

0.581

1.297

96.9

0.586

1.308

60% R22
25% R124
15% R142b
R409B

Mixture of
65% R22
25% R124
10% R142b

R410A

Mixture of
50% R32
50% R125

R410B

Mixture of
45% R32
55% R125

R411A

Mixture of
1.5% R1270
87.5% R22
11% R152a

R411B

Mixture of
3% R1270
94% R22
3% R152a

R411C

Mixture of
3% R1270
95.5% R22
1.5% R152a

R412A

Mixture of
70% R22
5% R218
25% R142b

R413A

Mixture of
9% R218
88% R134a
3% R600

R414A

Mixture of
51% R22
28.5% R124
4% R600a
16.5% R142

96 / 108

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INFICONGas designation

Gas library | 10

Other designations Molecular mass

(max. 8 digits)
R415A

Mixture of

Helium viscosity

Hydrogen/mass 3(amu)

factorviscosity factor

81.7

0.622

1.388

111.9

0.576

1.286

106.7

0.61

1.362

112.2

0.622

1.388

104.9

0.617

1.377

49.6

0.398

0.888

81.8

0.629

1.404

99.3

0.625

1.395

82% R22
18% R152a
R416A

Mixture of
59% R134a
39.5% R124
1.5% R600

R417A

Mixture of
50% R134a
46% R125
4% R600a

R422D

Mixture of
65.1% R125
31.5% R134a
3.4% R600a

R438A

Mixture of
45% R125
44.2% R134a
8.5% R32
1.7% R600
0.6% R601a

R441A

Mixture of
54.8% R290
36.1% R600
6% R600a
3.1% R170

R442A

Mixture of
31% R32
31% R125
30% R134a
5% R227ea
3% R152a

R448A

Mixture of
26% R32
26% R125
21% R134a
20% R1234yf
7% R1234ze

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10 | Gas library

Gas designation

INFICON

Other designations Molecular mass

(max. 8 digits)
R449A

Mixture of

Helium viscosity

Hydrogen/mass 3(amu)

factorviscosity factor

87.2

0.622

1.388

109

0.592

1.321

103.5

0.612

1.366

72.9

0.639

1.426

90.8

0.62

1.384

99.3

0.581

1.297

93.1

0.627

1.4

111.6

0.647

1.444

87.3

0.709

1.583

79.3

0.678

1.513

103.5

0.612

1.366

93.7

0.561

1.252

25.7% R134
25.3% R1234yf
24.7% R125
24.3% R32
R450A

Mixture of
58% R1234ze
42% R134a

R452A

Mixture of
59% R125
30% R1234yf
11% R32

R452B

Mixture of
67% R32
26% R1234yf
7% R125

R454C

Mixture of
22% R32
78% R1234yf

R500

Mixture of
74% R12
26% R152a

R501

Mixture of
75% R22
25% R12

R502

Mixture of
49% R22
51% R115

R503

Mixture of
40% R23
60% R13

R504

Mixture of
48% R32
52% R115

R505

Mixture of
78% R12
22% R31

R506

Mixture of
55% R31
45% R114

98 / 108

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INFICONGas designation

Gas library | 10

Other designations Molecular mass

(max. 8 digits)
R507

Mixture of

Helium viscosity

Hydrogen/mass 3(amu)

factorviscosity factor

98.9

0.612

1.366

100.1

0.729

1.627

95.4

0.729

1.627

108.7

0.582

1.299

58.1

0.377

0.842

58.1

0.377

0.842

72.2

0.341

0.761

72.2

0.336

0.75

72.2

0.337

0.752

70.1

0.337

0.752

50% R125
50% R143a
R508A

Mixture of
39% R23
61% R116

R508B

Mixture of
46% R23
54% R116

R513A

Mixture of
44% R134a
56% R1234yf

R600

C4H10
Butane

R600a

C4H10
Iso-Butane

R601

C5H12
Pentane

R601a

C5H12
Iso-Pentane

R601b

C5H12
Neopentane

R601c

C5H12
Cyclopentane

R1233zd

C3H2ClF3

130.5

0.558

1.246

R1234yf

C3H2F4

114

0.624

1.393

R1234ze

C3H2F4

114

0.619

1.382

R1243zf

C3H3F3

96

0.6

1.339

Ar

Argon

40

1.127

2.516

CO2

R744

44

0.744

1.661

H2

Hydrogen

2

0.448

1

H 2O

R718

18

0.459

1.025

He

Helium

4

1

2.232

HT135

Galden HT135

610

1

2.232

Kr

Krypton

84

1.275

2.846

N2

Nitrogen

28

0.892

1.991

Ne

Neon

20.2

1.586

3.54

NH3

R717

17

0.505

1.127

XL3000flex-Operating-instructions-jina83en1-10-(2307)

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10 | Gas library

Gas designation

INFICON

Other designations Molecular mass

(max. 8 digits)
O2

OxygenSF6

Helium viscosity

Hydrogen/mass 3(amu)

factorviscosity factor

32

1.03

2.299

146.1

0.765

1.708

Xe

Xenon

131.3

1.153

2.574

ZT130

Galden ZT130

497

1

2.232

Table 1: Gas library V3.24

100 / 108

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INFICON

Accessories | 11

11 Accessories
The parts listed below can additionally be ordered.
Designation

Catalog number

BM1000BM1000 PROFIBUS

560-315

BM1000 PROFINET IO

560-316

BM1000 DeviceNet

560-317

BM1000 EtherNet/IP

560-318

IO1000 module560-310

Data cable 0.5 m

560-334

Data cable 5 m

560-335

Data cable 10 m

560-340

Control unit CU1000

560-320

SL3000XL-3, sniffer line 3m length521-011SL3000XL-5, sniffer line 5m length521-012SL3000XL-10, sniffer line 10m length521-013SL3000XL-15, sniffer line 15m length521-014

Holder for sniffer line

525-006

Adapter customer sniffer line PROTEC P3000XL

521-015

Oil / Water Protection Tip for SL3000XL

521-016

Filter for Oil/Water Protection Tip

521-017

Sniffer tip ST312XL, 120 mm, rigid

521-018

Sniffer tip FT312XL, 120 mm, flexible

521-019

Sniffer tip ST385XL, 385 mm, rigid

521-020

Sniffer tip FT385XL, 385 mm, flexible

521-021

Sniffer tip FT250XL, 250 mm, flexible

521-022Filter cartridge for SL3000XL (25x)521-023

XL3000flex-Operating-instructions-jina83en1-10-(2307)

101 / 108

12 | CE Declaration of Conformity

INFICON

12 CE Declaration of Conformity

102 / 108

XL3000flex-Operating-instructions-jina83en1-10-(2307)

INFICON

XL3000flex-Operating-instructions-jina83en1-10-(2307)

CE Declaration of Conformity | 12

103 / 108

13 | RoHSINFICON

13 RoHS104 / 108

XL3000flex-Operating-instructions-jina83en1-10-(2307)

INFICON

Index

Index
A

H

Access controls

38

Handle18

Ambient temperature

23

High flow

11

B

I

Brightness

43

C

I/O port

43

K

Calibrating

Keyboard lock

External Calibration Configuration and Start

59

Time and general preferences

58

Calibration adapter CalMate

63

CalMate63

Cathode40

Cleaning and maintenance86

Cleaning works

86

Copy files

70

D
Date

34

Declaration of Contamination

91

Degree of contamination

23

Description11

Detection limit

11

Dimensions

22

19

L
Language33

Leak rate unit

34

Low flow

11

M
Main fuse

22

Mains switch

33

Maintenance86

Measure67

Measurement display

19

Measurement view

41

N
Noise behavior

67

E
Equivalence factor

53

O

Equivalence leak rate

53

Operating voltage

22

Error message

76

Operation mode

12

F

P

Factory settings

23

Power

22

fan input

16

Pressure unit

35

Protection class22G
Gas flow

12

R
Reset
Reset button

XL3000flex-Operating-instructions-jina83en1-10-(2307)

75
13, 20105 / 108

IndexReturn shipment

INFICON

91

S
Scope of delivery

10

Setting setpoints

57

Sniffer line

11

Sniffer mode

52

Speaker

13

Storage temperature

23

T
Time

34

Touch PIN

10, 13, 20

Touchscreen

13, 14, 40

U
USB flash drive

70

V
View

13, 14W
Warning

42, 76

Warnings as errors

84

Weight22

X
XL3000flexRC

106 / 108

14, 32, 39

XL3000flex-Operating-instructions-jina83en1-10-(2307)