Single-Axis Rotary Direct-Drive
Nanopositioning Stages

NANO Technology

nano Motion Technology

ANT95-R SeriesHigh resolution (0.01 arc sec)
ANT95-R SeriesHigh performance
Unlimited rotation
Outstanding error motion specifications
Excellent in-position stability
Multi-axis configurations
High dynamic performance

Introduction
The ANT95-R and ANT95-R-PLUS direct-drive rotary stages
are designed as part of Aerotech’s nano Motion Technology
product family. Our rotary stages offer unprecedented inposition stability (0.005 arc sec) and sub 0.01 arc-sec
incremental motion performance, and are offered in twogrades of accuracy.

and small-size performance capability for almost any nanomanufacturing or inspection application.

Dynamic Performance
In addition to the high precision levels, these systems offer
high dynamic performance and throughput ideal for disk drive
manufacture and test.

The ANT95-R stage series was designed to operate in a 24/7
manufacturing environment. Unlike other rotary devices, theANT95-R requires no periodic maintenance, assuring years oftrouble-free operation.

0.53
0.48

0.11
0.1

0.44

0.09

0.39
0.34

0.08
0.07

0.29

0.06

0.24

0.05

0.19

0.04

0.150.1

0.03
0.02

0.05

0.01

000.05

Position (arc-sec)

Durability

The ANT95-R series is designed for compatibility and easy
integration with Aerotech’s ANT linear stage productofferings. Together these stages provide accuracy, stability,

Position (rad)Multi-Axis Capabilities

0.01
05

1015Time (sec)2025

ANT95-R 0.01 arc sec step plot. Best-in-class resolution andexceptional in-position stability for unlimited rotation stages.

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59NANO Technology
ANT95-R Series

ANT95-R/ANT95-R-PLUS Series SPECIFICATIONS
Mechanical
Specifications

ANT95-20-R ANT95-20-R-PLUS ANT95-180-R ANT95-180-R-PLUS ANT95-360-R ANT95-360-R-PLUS
20°

20°

180°

180°

±360° Continuous

Accuracy(1)10 arc sec

3 arc sec

10 arc sec

3 arc sec

10 arc sec

3 arc sec

Resolution

0.01 arc sec

0.01 arc sec

0.01 arc sec

0.01 arc sec

0.01 arc sec

0.01 arc sec

Repeatability(Bi-Directional)(1)

1.5 arc sec

1.5 arc sec

1.5 arc sec

1.5 arc sec

1.5 arc sec

1.5 arc sec

Repeatability(Uni-Directional)

0.5 arc sec

0.5 arc sec

0.5 arc sec

0.5 arc sec

0.5 arc sec

0.5 arc sec

Rotation Angle±360° Continuous

Tilt Error
MotionSynchronous

NANA

NA

NA

10 arc sec

10 arc sec

Asynchronous

NANA

NA

NA

3 arc sec

3 arc sec

AxialError
Motion(1)Synchronous

NANA

NA

NA

2 µm

2 µm

Asynchronous

NANA

NA

NA

0.5 µm

0.5 µmRadialError
Motion(1)Synchronous

NANA

NA

NA

3 µm

3 µm

Asynchronous

NANA

NA

NA

1 µm

1 µm

20 rpm20 rpm20 rpm20 rpm200 rpm

200 rpm

Maximum Speed
Maximum Acceleration

400 rad/s2

400 rad/s2

400 rad/s2

400 rad/s2

400 rad/s2

400 rad/s2

In-Position Stability(2)0.005 arc sec

0.005 arc sec

0.005 arc sec

0.005 arc sec

0.005 arc sec

0.005 arc sec

11 mm (0.433 in)

11 mm (0.433 in)

11 mm (0.433 in)

11 mm (0.433 in)

11 mm (0.433 in)

11 mm (0.433 in)

Aperture
Maximum Torque(Continuous)

0.2 Nm

0.2 Nm

0.2 Nm

0.2 Nm

0.2 Nm

0.2 NmAxial

2.0 kg (4.4 lb)

2.0 kg (4.4 lb)

2.0 kg (4.4 lb)

2.0 kg (4.4 lb)

2.0 kg (4.4 lb)

2.0 kg (4.4 lb)

Radial

1.5 kg (3.3 lb)

1.5 kg (3.3 lb)

1.5 kg (3.3 lb)

1.5 kg (3.3 lb)

1.5 kg (3.3 lb)

1.5 kg (3.3 lb)

Moment

2 Nm

2 Nm

2 Nm

2 Nm

2 Nm

2 Nm

Rotor Inertia (Unloaded)

0.00065 kg-m2

0.00065 kg-m2

0.00066 kg-m2

0.00066 kg-m2

0.00069 kg-m2

0.00069 kg-m2

Stage Mass

1.2 kg (2.6 lb)

1.2 kg (2.6 lb)

1.2 kg (2.6 lb)

1.2 kg (2.6 lb)

1.2 kg (2.6 lb)

1.2 kg (2.6 lb)

LoadCapacity(3)Aluminum Body/Black Hardcoat Finish

MaterialMTBF (Mean Time
Between Failure)

30,000 Hours

Notes:
1. Certified with each stage. Requires the use of an Aerotech controller.
2. In-Position Jitter listing is 3 sigma value.
3. Axis orientation for on-axis loading is listed.
• Specifications are per axis, measured 25 mm above the tabletop. Consult factory for multi-axis or non-standard applications.
• All error motion specifications are measured at 60 rpm.
• For high speed operation, customer payload must be balanced to G1.0 per ISO 1940.

Electrical Specifications

ANT95-20-R
ANT95-20-R-PLUS

ANT95-180-R
ANT95-180-R-PLUS

Slotless, Brushless, Direct-Drive Rotary Motor

Drive System

Noncontact Rotary Encoder

Feedback±40 VDC

Maximum Bus Voltage
Limit Switches

5 V, Normally Closed

Home Switch

Near Center

Recommended Controller

ANT95-20-R
ANT95-20-R-PLUS

ANT95-180-R
ANT95-180-R-PLUS

A3200

Npaq MXR
Npaq MR-MXH
Ndrive ML-MXH

Ensemble

Epaq MXR
Epaq MR-MXH
Ensemble ML-MXH

Soloist

Soloist ML-MXH

Multi-Axis

Single Axis

ANT95-360-R
ANT95-360-R-PLUS

ANT95-360-R
ANT95-360-R-PLUS

Notes:
1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within
0.25ºC/24 hours. If this is not possible, alternate products are available. Please consult Aerotech Application Engineering for more information.

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5.8

1.2

3.9

0.8

1.9

0.4

00

1.9

0.4

3.9

0.8

5.8

1.2

7.7

90
2m

Error (arc sec)

1.6-2 m180

1.6
0100

200
Position (deg)

270

300

0.004

0.015

0.003

0.0100.002

0.005

0.001
000.005

0.001

0.010

0.002

0.015

0.003

0.020

0.004
024Time (s)6ANT95-R plot showing best-in-class in-position stability.

Synchronous = 0.6 µm
Asynchronous = 0.2 µm

ANT95-R axial error plot illustrating outstanding synchronous andasynchronous error motion performance.

90
Position (arc sec)

Position (rad)

ANT95-R-PLUS accuracy plot showing excellent accuracy and bidirectional positioning capability.

0.020

0

ANT95-R Series

Error (rad)

7.7

NANO Technology

ANT95-R/ANT95-R-PLUS Series PERFORMANCE

2 m-2 m180

0270

Synchronous = 1.9 µm
Asynchronous = 0.2 µm

ANT95-R radial error plot illustrating outstanding synchronous andasynchronous error motion performance.

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NANO Technology
ANT95-R Series

ANT95-R/ANT95-R-PLUS DIMENSIONS60°
TYP

STAGE MOUNTING
8X
4.8 THRU ALL
813.5

50 B.C.

APERTURE+0.01311075 B.C.
84
SQR

25PIN MOTOR / FEEDBACK CONNECTORHEIGHT = 2675
SQR

42TYP

2X

54

5.8 THRU ALL

37.5TYP40

68~925CABLE
LENGTH146A
1/2 NORMALTRAVELCUSTOMER MOUNTING
3.0
12X M3X0.5 HELICOILEQUALLY SPACED ON B.C.

B
1/2 LIMITTRAVELC
1/2 HARDSTOPTRAVEL
9949.5TYP

4221.550TYP

15100100
DIMENSIONS: MILLIMETERS

62

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50.8
SQR

24.6
TYP

BREADBOARD MOUNTING PATTERN
4x M6 OR 1/4-20 SHCS C'BORE SLOTSSTAGE MOUNTING
4x M4x0.7 THRU

20 THRU

50TYP

25TYP

ANT95-R Series

100
SQR

50
SQR

75
SQR

12.5
TYPNANO Technology

ANT95-R/ANT95-R-PLUS Mounting Plate DIMENSIONS

10DIMENSIONS: MILLIMETERS

ANT95-R/ANT95-R-PLUS Series ORDERING INFORMATION
ANT95-R Series Rotary Stage
ANT95-R
Aerotech direct-drive rotary positioner
Rotary Stage Travel
ANT95-20-R
20° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder,optical limits, and hard stops
ANT95-20-R-PLUS
20° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder,optical limits, and hard stops (high accuracy version)
ANT95-180-R
180° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder,optical limits, and hard stops
ANT95-180-R-PLUS 180° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder,optical limits, and hard stops (high accuracy version)
ANT95-360-R
360° continuous rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary
encoder, and optical limits
ANT95-360-R-PLUS 360° continuous rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary
encoder, and optical limits (high accuracy version)
Options-MP
Breadboard mounting plate

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