MMC Activities..............1MEMS-ONE Pj...............5
Overseas Trends............6
Member’s Profiles .........7
Worldwide R&D ............8

MMC Activities

Overview of MMC’s Activities in Fiscal 2005
I. Basic Objectives of Activities
The basic objectives of MMC activities are, firstly, toestablish basic micromachine technologies and increase
utilization of micromachines through promoting research andinvestigation of micromachines (MEMS and other minutemachines and systems), collection and provision of
micromachine information, and exchange and cooperation withworldwide organizations; and secondly, to contribute to thefurther development of Japan’s industrial economy and tointernational society.
MMC’s basic objectives in Fiscal 2005 are, as in the previous
fiscal year, to promote the industrialization ofmicromachines/MEMS and to strive for the establishment ofnext generation basic micromachine and NEMS technologies inaccordance with trends in cutting-edge technological fields
such as biotechnology, nanotechnology, and IT.

II. Description of Primary Activities
1. Research and Investigation of Micromachines
Planned activities in the field of micromachine/MEMS
technology, which is becoming a key technology for themanufacturing industry, are aimed towards gaining a clear
understanding of the trends in micromachine technologies andindustries and conducting investigations of and research onnew technological issues regarding the fusion of micro- andnano-technologies. The MMC also proposes national and NEDO
projects in fields in which new research and development isdeemed necessary.
(National/NEDO Project-related Activities)(1) MEMS-ONE: MEMS Open Network Engineering System
of Design Tools Project (NEDO-commissioned project)
Now entering its second year, the objective of the MEMSONE Project is to develop an open network engineering systemof design tools for MEMS. This is starting to be made possible
for the first time by bringing together the intellectual data ofuniversities, corporate researchers and technicians that have a
track record in cutting-edge MEMS research and development,
the leading numerical analysis researchers and softwaredevelopment companies, and foundry-operating businesses andpublic institutions, the latter two of which both have substantial
knowledge about the problems that occur in the MEMS
manufacturing process. In particular, the MMC plays amanagement role in cooperation with universities and the AISTin overseeing the creation of a knowledge/materials database, as
well as the promotion and progress of the project overall.
(2) Studies on MEMS-ONE Propagation Activities(NEDO-commissioned project)
In parallel with the MEMS-ONE project, studies will be
conducted on activities that promote MEMS-ONE as part ofresearch on the propagation effect of and propagation activities
related to the project. In Fiscal 2004, studies were conducted on
the attitudes and needs of Japan-based businesses, universities,
and public institutions that were potential users. In Fiscal 2005,
however, studies will be conducted mainly on effective
propagation methods, including the role of support centers.
(3) Next Generation Project Investigation Committee
With a view nationalizing the Next Generation Project from
Fiscal 2006 in accordance with Fiscal 2004 proposals, policies

Internet Home Page : http://www.mmc.or.jp/

concerning the project’s research system and development base,refinement of the research topics undertaken and theconsequent results, and elaboration of common elements for
integration will be considered.
(4) Micro-chemical Chip DB System(Contract agreement with The Research Associationof Micro Chemical Process Technology)
As part of the Microanalysis/Production System Project, inwhich The Research Association of Micro Chemical Process
Technology plays a central role, the MMC is creating a databaseof documentary information useful in the research anddevelopment of microchip devices and systems as well as
carrying out activities, such as information gathering and dataprovision, that aid the creation of this database.
(Research and Investigation-related Activities)(5) Studies on R & D trends for micromachinetechnology in Japan and abroad
These studies aim to identify and analyze the latest trends
in the field of micromachine technology, which is progressing at
a remarkable pace, and micromachine R&D in Japan andabroad; and to develop basic technological data to aid indeveloping micromachine technologies.
(6) Joint Survey Research Activities Concerning theIndustrialization of MEMS
Opportunities for the industrial application of MEMS havebeen opening up rapidly in recent years; in order to further
accelerate the industrialization of MEMS, this research willcomprehensively tackle such challenges as advancing foundry
services and coordinating MEMS devices and materials fields.
Joint research with businesses that provide foundry services
will also be conducted, as in the previous fiscal year, on specificissues such as overseas foundry fact-finding missions, process
standardization, creation of a materials database, andcoordination between foundries.
(7) Studies on MEMS Reliability Assessment Technology(application submitted to the Japan Machinery
Federation as a commissioned project)This research project involves the investigation andconsideration of current status, issues, and policies relevant to
the improvement of MEMS reliability.

2. Collection and Provision of Micromachine Information
Information and documents on micromachine use inuniversities, industries, and public organizations in Japan andoverseas will be collected, combined with survey results andMMC-produced documents, and made freely available in theMMC library. At the same time, information will bedisseminated widely, both domestically and internationally,through the MMC website.
(1) Improved Dissemination and Exchange ofInformation through the MMC Website
Utilizing the MMC website, efforts to exchange anddisseminate information will be made proactively. Website
content aimed at supporting members will be enhanced.
(2) Publication of a Micromachine Periodical“Micromachine Index,” containing abstracts of technicaldocuments and information on materials, is issued on a regularbasis and provided to supporting members and organizations
concerned with micromachines.

(1) Standardization of Fatigue Testing Methods for
Micro-nano Materials (NEDO-commissioned project)
Continuing from last year, research on standard fatigue
testing methods that enable evaluation of the properties ofvarious thin film materials measuring less than 10µm wide and100µm long, with the aim of international standardization.
Fatigue tests using conventional 1/1000 sized specimens will be
conducted in order to clarify the limits of application for fatigue
testing methods that use the current standard mm orderspecimens, and proposals for international standards will bemade in Fiscal 2005, the 3-year project’s final year.
(2) Standardization of Tensile Testing Methods for Thin Film Materials
The results of MMC research conducted between Fiscal
1999 and Fiscal 2001 as part of the NEDO project“standardization of evaluation method of properties for
micromachine material” have been included in international
standardization proposals submitted to IEC in Fiscal 2003; theCD (Committee Draft) was approved in Fiscal 2004 and theCDV (Committee Draft for Vote) will be submitted in Fiscal
2005. This year MMC will continue its activities towards
international standardization.
(3) Standardization of Micromachine Terminology
Having passed the NP (New Project) stage, theinternational specifications proposal “Technical Terms in
Micromachine Technology” submitted to IEC in Fiscal 2002 wasapproved at the CDV (Committee Draft for Vote) stage in Fiscal
2004, and the FDIS (Final Draft International Standard) will bedrawn up in Fiscal 2005. This year MMC will again continue its
activities towards international standardization.

(3) Publication of a Newsletter
Information concerning research and governmental trends
related to micromachines is distributed monthly to supporting
members and other interested individual and organizations.
(4) Maintaining and Upgrading the MMC LibraryTechnical documents and materials are collected and stored
in the MMC library and listed in a database together with otherrelevant information.

3. Exchange and Cooperation with Organizations Worldwide
To promote affiliation, exchange and cooperation withrelated organizations in and outside Japan, MMC will involve
itself in such activities as participating in the micromachinesummits, holding international symposiums, inviting to Japanand sending overseas researchers and experts in the field, andbuilding foundry services.
(1) Participation in the 11th Micromachine Summit
MMC will participate in the 11th Micromachine Summit inDallas, USA, taking part in discussions of a wide range of topics,
including worldwide trends in micromachine technology and its
fields of application.
(2) Holding the 11 t h International Micromachine/Nanotech
Symposium (partially subsidized by activities promoting theJapan Motorcycle Racing Organization)
This year MMC will hold the 11 t h International
Micromachine/Nanotech Symposium focusing on technologicalissues pertaining to and the future prospects for the fusion of
micromachine/MEMS and nanotechnology.
(3) International Exchange and Dispatch of ResearchersA group will be dispatched overseas to promote theexchange of information and opinions with micromachinerelated research institutes in universities and similar institutions.
This group will also participate in international symposiums andacademic meetings held overseas. MMC will further promoteexchange by inviting experts in the field from America andEurope and by sending our experts and researchers overseas.
(4) Building a foundry network system
Foundries are vital to the industrialization of MEMS. In
order to improve these facilities, we will undertake theestablishment of a system to improve services through anetwork comprising members of the Foundry Service Industry
Committee, who represent businesses either involved in orrelated to the provision of foundry services.
(5) Establishing a forum for the exchange of cuttingedge micro/nano technology
In order to accelerate the development of cutting-edge
micro/nano technology – a basic technology expected to have adiversity of applications in various fields – MMC will hold ameeting for the exchange of cutting-edge micro/nanotechnologies as an exploratory opportunity for the exchange ofinformation and joint research as in the previous fiscal year.

(4) Research and Investigation of Micromachine Standardization
Further to the international standardization proposals
mentioned above, to enable formulation of new strategic
proposals for international standardization, issues for inclusion
in standardization proposals will be narrowed down throughcooperation between the MEMS-ONE project and the MEMS
Reliability Assessment Committee and a roadmap for futureinternational standardization formulated.

5. Dissemination of Information and Education
about Micromachines
By issuing and distributing quarterly magazines and by holding
exhibitions, we hope to disseminate information on micromachines
extensively in order to educate as many people as possible.

4. Standardization of Micromachines(1) The quarterly magazine “MICROMACHINE” will be
published periodically and distributed to those in orconnected with the field. The quarterly magazine will
also be made available on the Internet through theCenter’s home page.
(2) The 16th Micromachine Exhibition and other events
will be held to present the latest researchachievements, as well as the latest cutting-edge
micromachine/MEMS industry-related products andproduct materials.

In cutting-edge technological fields such as
micromachine/MEMS, standardization is being promoted asinternational initiatives are being taken.

(3) We will serve as the Federation of MicromachineTechnology Secretariat to work with and strengthen
micromachine-related organizations.

Upcoming Event Announcement
The 2005 International Micromachine / Nanotech Symposium and Micromachine Exhibition

The 11th International Micromachine/ Nanotech Symposium
November 10 (Thurs.), 2005
Science Hall
Science Museum, Tokyo (Kitanomaru Park)The 16th Micromachine Exhibition
November 9 (Wed.) – 11 (Fri.), 2005
Science Museum, Tokyo (Kitanomaru Park)2