Cover Page

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Transpector® CPM
Compact Process Monitor
PN 074-641-P1B

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Trademarks
The trademarks of the products mentioned in this manual are held by the companies that
produce them.
INFICON®, Transpector®, and FabGuard® are registered trademarks and FabGuard Explorer™ is a trademarkof INFICON.
Windows®, Windows NT® and Microsoft® are registered trademarks of Microsoft Corporation.
Teflon® is a registered trademark of DuPont Co.
Swagelok® is a registered trademark of Swagelok Co.
All other brand and product names are trademarks or registered trademarks of their respective companies.

Disclaimer
The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes
no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related
to the use of this product.
Due to our continuing program of product improvements, specifications are subject to change without notice.

Copyright©2016 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.

Declaration Of Conformity
Page 1

Warranty

Warranty
Standard INFICON One Year
Page 1WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products
manufactured by it, or by an affiliated company and sold by it, and described on
the reverse hereof, to be, for the period of warranty coverage specified below, freefrom defects of materials or workmanship under normal proper use and service.
The period of warranty coverage is specified for the respective products in therespective Seller instruction manuals for those products but shall not be less thanone (1) year from the date of shipment thereof by Seller. Seller's liability under thiswarranty is limited to such of the above products or parts thereof as are returned,
transportation prepaid, to Seller's plant, not later than thirty (30) days after the
expiration of the period of warranty coverage in respect thereof and are found bySeller's examination to have failed to function properly because of defective
workmanship or materials and not because of improper installation or misuse andis limited to, at Seller's election, either (a) repairing and returning the product orpart thereof, or (b) furnishing a replacement product or part thereof, transportation
prepaid by Seller in either case. In the event Buyer discovers or learns that a
product does not conform to warranty, Buyer shall immediately notify Seller inwriting of such non-conformity, specifying in reasonable detail the nature of suchnon-conformity. If Seller is not provided with such written notification, Seller shallnot be liable for any further damages which could have been avoided if Seller had
been provided with immediate written notification.
THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHERWARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR
OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S
EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLDHEREUNDER. All other obligations and liabilities of Seller, whether in contract or
tort (including negligence) or otherwise, are expressly EXCLUDED. In no event
shall Seller be liable for any costs, expenses or damages, whether direct orindirect, special, incidental, consequential, or other, on any claim of any defective
product, in excess of the price paid by Buyer for the product plus returntransportation charges prepaid.
No warranty is made by Seller of any Seller product which has been installed,
used or operated contrary to Seller's written instruction manual or which has been
subjected to misuse, negligence or accident or has been repaired or altered byanyone other than Seller or which has been used in a manner or for a purpose forwhich the Seller product was not designed nor against any defects due to plans or
instructions supplied to Seller by or for Buyer.
This manual is intended for private use by INFICON® Inc. and its customers.
Contact INFICON before reproducing its contents.
NOTE: These instructions do not provide for every contingency that may arise inconnection with the installation, operation or maintenance of this equipment.
Should you require further assistance, please contact INFICON.

www.inficon.com

re achus@inficon.com

Transpector CPM Operating Manual

Table Of Contents
Cover Page
Trademarks
Disclaimer
Copyright
Declaration Of Conformity
Warranty

Chapter 1
Getting Started
1.1
1.2
1.2.1
1.3
1.4
1.4.1
1.5
1.5.1
1.5.2
1.5.3
1.6
1.6.1
1.6.2
1.6.3
1.7
1.7.1
1.7.1.1

General Safety Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
Purpose of Transpector CPM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
Description of the Transpector CPM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
Using this Operating Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
How to Contact INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
Returning Transpector CPM to INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
Transpector CPM Performance Specifications. . . . . . . . . . . . . . . . . . . . . . . 1-5
General Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Hex Block Orifice Sampling Inlets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
Atmospheric Pressure (Capillary) Sampling. . . . . . . . . . . . . . . . . . . . . . . . . 1-8
Physical Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
Physical Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9
Weight . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
Ventilation Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
Electrical Power Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
Required Supply Voltage . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10
Acceptable Supply Voltage Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10

1.7.1.2

Required Frequency . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10

1.7.1.3

Power Rating . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-10

1.7.1.4

Fuse Rating . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11

1.7.1.5

Overvoltage Category. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11

1.7.1.6

Electrical Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-11

1.8
1.9
1.10
1.10.1
1.10.2

Nitrogen Purge Gas (Corrosive System Only) . . . . . . . . . . . . . . . . . . . . . . 1-11
Exhaust Gas . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12
Air Pressure Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13
Required Air Pressure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13
Air Pressure Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13

TOC – 1

Transpector CPM Operating Manual

1.10.3
1.10.4
1.11
1.11.1
1.11.2
1.12
1.12.1
1.12.2
1.12.3
1.12.41.12.5
1.12.6
1.12.71.12.81.13
1.13.1

Moisture Content of Compressed Air Supply . . . . . . . . . . . . . . . . . . . . . . . 1-13
Air Pressure Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13
Vacuum Requirements. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
Required Vacuum. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
Acceptable Range Of Vacuum . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
Environmental Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
Use . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
Altitude Range . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
Maximum Humidity. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
Pollution Degree. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
Maximum Operating Temperature . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
Minimum Operating Temperatures. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-14
Clean Room Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15
Anti-Static Conditions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15
Computer System Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15
Operating System. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-15

Chapter 2
Installation
2.1
2.2
2.2.1
2.2.2
2.2.3
2.3
2.4
2.4.1
2.4.2
2.5
2.6
2.7
2.8

Installation Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
Transpector Electronics Module, Heat Guard, and Cable Box Installation . 2-2
Attach Transpector Electronics Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
Attach Heat Guard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
Attach Cable Box . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
Sniffer Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5
Mounting the Pumping System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5
Installing the Support Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-6
Atmospheric Support Frame . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
CPM Controller Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
Transpector Cable Box Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9
CPM Foreline Pump Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11
Software Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11

Chapter 3
Connecting Transpector CPM
3.1
3.2
3.2.1
3.2.2
3.3

TOC – 2Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
General Networking Information. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
IP Addresses . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
Subnetworking . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
Transpector CPM IP Address. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2

Transpector CPM Operating Manual

3.3.1
3.3.1.1

Using the INFICON Mass Spectrometer Search Utility to
Change the Transpector CPM IP Address . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Change IP Address . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

3.3.1.2

Launch Web UI. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5

3.3.1.3

Find Device. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5

3.3.1.4

Show Settings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-5

3.4
3.4.1
3.4.1.1

Connecting Transpector CPM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
Connecting a Single Transpector CPM . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-6
Single Transpector CPM Direct Connection Installation. . . . . . . . . . . . . . . . 3-6

3.4.1.2

Installing a Single Transpector CPM on an Existing Local Network. . . . . . . 3-6

3.4.2
3.4.2.1

Installing Multiple Transpector CPM Sensors. . . . . . . . . . . . . . . . . . . . . . . . 3-7
Installing Multiple Transpector CPM Directly to a Host Computer . . . . . . . . 3-7

3.4.2.2

Installing Multiple Transpector CPM on an Existing Local Network . . . . . . . 3-7

3.5
3.5.1

Changing the Computer IP Address. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8
Windows 7 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8

Chapter 4
How the CPM System Works
4.1
4.2
4.3
4.3.1
4.3.1.1

CPM Components . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
Instrument Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
Input/Output (Aux I/O) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
CPM Aux I/O Connector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

4.3.1.2

Two Digital Inputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

4.3.1.3

One Status Relay Output . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3

4.3.1.4

One Analog Input . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4

4.3.2
4.3.2.1

Ultra-High Vacuum System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4
Foreline Subsystem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5

4.3.3
4.3.4
4.3.5
4.3.6
4.4
4.5
4.5.1
4.5.2
4.5.3
4.6
4.6.1
4.6.2

Heater(s) Subsystem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
CPM Controller Subsystem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-5
Solenoid Valves . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6
Sensor and Transpector Electronics Module Subsystem. . . . . . . . . . . . . . . 4-7
Application . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
Sample Inlet Systems and Examples of Use . . . . . . . . . . . . . . . . . . . . . . . . 4-9
Inlet System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-9
High Pressure Sampling: Orifice Bypass (V4) . . . . . . . . . . . . . . . . . . . . . . 4-12
Dual-Capillary Sampling Option . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-13
Advice and Tips . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-14
Achieving Good Base Pressure in the CPM. . . . . . . . . . . . . . . . . . . . . . . . 4-14
Avoiding Trapped Gas when Sampling Valves are Closed . . . . . . . . . . . . 4-14

TOC – 3

Transpector CPM Operating Manual

Chapter 5
Theory and Application Guide
5.1
5.2
5.2.1
5.2.2
5.2.2.1

Theory of Operation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
Sensors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
The Ion Source. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-2
The Quadrupole Mass Filter. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4
Scanning Characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-6

5.2.2.2

The Zero Blast . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-7

5.2.3
5.2.3.1

The Ion Detector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8
The Electron Multiplier (EM) Detector . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-8

5.2.3.2

The Continuous Dynode Electron Multiplier/Faraday Cup Detector. . . . . . . 5-9

5.3
5.3.1
5.3.1.1

How to Interpret The Result . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-11
Qualitative Interpretation Of Mass Spectra . . . . . . . . . . . . . . . . . . . . . . . . 5-11
Ionization Process . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-13

5.3.1.2

Isotope Ratios . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-15

5.3.1.3

Electron Energy Effects . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-17

5.3.1.4

A Qualitative Interpretation Guide . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-19

5.3.1.5

Dry Etching Chemistries. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-22

5.3.1.6

Tungsten CVD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-24

5.3.1.7

Copper MOCVD . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-25

5.3.2
5.3.3
5.3.3.1

Quantitative Interpretation of Mass Spectra(Calculating Partial Pressures). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-26
Additional Information For Interpreting Mass Spectra . . . . . . . . . . . . . . . . 5-32
Ion Source Characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-32

5.3.3.2

Scanning Characteristics . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-33

5.3.3.3

Fragmentation Factors . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-34

Chapter 6
Operation
6.1
6.1.1
6.1.1.1

HexBlock . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1
HexBlock Inlet . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2
Hex Block Process Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3

6.1.2
6.1.2.1

Calibration Option. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-3
High Mass FC5311 Tuning Reference . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-4

6.1.3
6.2
6.3
6.3.1
6.3.1.1

Process Gauge (CDG) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5
Heaters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5
Pumping System . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-5
Foreline Pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6
Foreline Pirani Gauge . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6

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Transpector CPM Operating Manual

6.3.2
6.3.2.1

Turbo Molecular Pump . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-6
Turbo Molecular Pump Status . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7

6.4

Nitrogen Purge Valve for the Turbo Molecular Pump on Corrosive Pumping
Systems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7
Filament Control . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7
Interlock . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7
Total Pressure Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-7
Filament Lifetime . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-8
Pneumatic Digital Pressure Switch and Pressure Gauge . . . . . . . . . . . . . 6-11
Setup Procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-11
How to Test for Proper Settings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-14
How to Lock and Unlock the Settings. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-14

6.5
6.5.1
6.5.2
6.5.3
6.6
6.6.1
6.6.2
6.6.3

Chapter 7
Maintenance
7.1
7.2
7.2.1
7.2.2
7.2.3
7.3
7.3.1
7.3.2
7.4
7.5
7.5.1
7.5.2
7.5.3
7.5.4
7.6
7.6.1
7.6.2
7.6.3
7.7
7.7.1
7.7.2
7.7.3
7.7.4
7.8
7.8.1

Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-1
Safety Considerations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-1
Toxic Material . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-2
Radiation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-2
Electrical Voltages . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-2
Maintenance Procedures . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3
Bakeout of Quadrupole. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3
Spare Heating Jacket . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-3
General Instructions For All Repair Procedures . . . . . . . . . . . . . . . . . . . . . . 7-4
Required Tools, Materials, or Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-5
Tools for Replacing the Filament Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-5
Tools for Replacing the Ion Source . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-5
Tools for Replacing the Electron Multiplier . . . . . . . . . . . . . . . . . . . . . . . . . . 7-5
Parts Required For Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-5
Changing Diaphragms in the Foreline Pump . . . . . . . . . . . . . . . . . . . . . . . . 7-6
Replacement Interval . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-6
Diaphragm kit PN 923-418-G1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-6
Procedure . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-7
Transpector Sensor Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-16
How to Determine if a Filament Kit Replacement is Required . . . . . . . . . . 7-17
Transpector Sensor Filament Replacement . . . . . . . . . . . . . . . . . . . . . . . . 7-18
Transpector Sensor Ion Source Replacement . . . . . . . . . . . . . . . . . . . . . . 7-20
Electron Multiplier Replacement. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-23
HexBlock Inlet Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-29
Valve and Orifice Replacement . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 7-29

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Transpector CPM Operating Manual

Chapter 8
Diagnosing Problems
8.1
8.2
8.3
8.4
8.5

Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-1
Communication Problems . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-1
CPM Symptom—Cause—Remedy Chart . . . . . . . . . . . . . . . . . . . . . . . . . . 8-2
If You Cannot Resolve Your Problem . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-9
Event Log Files. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 8-9

Chapter 9
Recommended Parts List
9.1
9.2
9.3
9.4

Ordering Information . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-1
CPM Consumable Parts. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-1
Preventative Maintenance Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-3
Replacement Spare Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 9-3

Chapter 10
FabGuard Explorer Operation
10.1
10.2
10.3
10.4
10.4.1
10.4.1.1

Operation (FabGuard Explorer) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-1
Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-1
Connecting to Transpector CPM . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-2
RGA Configuration—CPM tab . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-4
Valves and Orifices pane . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-5
Inlet LP . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-5

10.4.1.2

Inlet HP. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-5

10.4.1.2.1

Inlet HC . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-5

10.4.1.2.2

Inlet Bypass . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-5

10.4.1.2.3

Inlet Calibration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-6

10.4.210.4.2.1

Gauges pane . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-6
Process Gauge. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-6

10.4.3
10.5
10.6
10.6.1
10.6.1.1

Bypass Delay - Interlock between V2 and V4 . . . . . . . . . . . . . . . . . . . . . . 10-7
CPM Configuration Monitor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-8
CPM Sensor Acquisition Defaults . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-12What to Acquire (RGAs). . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-12
Acquisition Modes . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-12

10.6.1.1.1

Spectrum Mode Acquisition Parameters . . . . . . . . . . . . . . . . . . . . . . . . . 10-14

10.6.1.2

Selected Masses Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-15

10.6.1.2.1

Existing Masses . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-16

10.6.1.2.2

Adding Masses. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-17

10.6.210.6.2.1

How to Acquire (CPM) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-20
Ionizer Presets . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-21

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Transpector CPM Operating Manual

10.6.2.2

Start Parameters . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-21

10.6.2.2.1

Start Mode Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-21

10.6.2.2.2

Data Threshold . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-22

10.6.2.2.3

Emission . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-22

10.6.2.2.4

Multiplier . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-22

10.6.2.2.5

Relay 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-22

10.6.2.3

Stop Parameters. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-23

10.6.2.3.1

Stop Mode Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-23

10.6.2.3.2

Data Threshold . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-23

10.6.2.3.3

Maximum Duration . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-24

10.6.2.3.4

Emission . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-24

10.6.2.3.5

Multiplier . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-24

10.6.2.3.6

Relay 1 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-25

10.6.2.4

Dwell. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-25

10.6.2.4.1

Dwell Mode. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-25

10.6.2.4.2

Dwell Time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-26

10.6.2.5

Delay . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-26

10.6.2.5.1

Delay Mode . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-26

10.6.2.5.2

Time Between Scans . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-27

10.6.2.5.3

Stabilization Time . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-27

10.6.2.6

Correction . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-27

10.6.2.6.1

Baseline . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-27

10.6.2.6.2

Peak Lock. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-28

10.6.2.7

Inlet. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-28

10.6.2.7.1

Close After . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-29

10.6.2.7.2

Duty Cycle . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-29

10.6.2.8

Heater. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-29

10.6.2.8.1

Off After . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 10-29

Chapter 11
Glossary
Chapter 12
Bibliography

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Transpector CPM Operating Manual

Chapter 1
Getting Started
1.1 General Safety Information
WARNING
Transpector CPM is not for use in a manner not specified
by INFICON.

WARNING - Risk Of Electric Shock
There are no user serviceable components within theTranspector CPM case.

WARNING - Risk Of Electric ShockPotentially lethal voltages are present when the line cord
is connected to Transpector CPM.

WARNING - Risk Of Electric Shock
Refer all Transpector CPM maintenance to qualified
personnel.

1–1Transpector CPM Operating Manual

1.2 Purpose of Transpector CPM
Transpector CPM samples a representative fraction of a process environment anddirects the gas sample to a Residual Gas Analyzer (RGA). The CPM can detectlevels of impurities in process gases at sub-ppm levels.

1.2.1 Description of the Transpector CPM
Transpector CPM is comprised of:

FabGuard® or FabGuard Explorer™ software provides automatic or manualcontrol and status information. It includes a full array of basic residual gas
analyzer (RGA) features, including Spectrum or Selected Peaks scanning,
Leak Detection and Recipe Generation.

Quadrupole Sensor analyzes gases by: (1) ionizing the gas molecules,(2) separating the ions by their mass-to-charge ratio, and (3) measuring thequantity of ions at each mass. The sensor can indicate the partial pressures ofgases characteristic of processes occurring within a vacuum or other vessel,
and is used to investigate the nature of a process or to monitor process
conditions.

Electronics Module (Transpector®) controls the sensor. The electronics
module and quadrupole sensor are a matched set. The electronics module
attaches to and is supported by the sensor.



CPM Controller consolidates control functions into a single device. The CPM
controller works in conjunction with the Transpector electronics module tocontrol valve activation, heaters, pumps, and power to all elements of thesystem.



Pumping System provides process sampling from 1.5 atmospheres to highvacuum.



Inlet Valves, a HexBlock™ inlet provides several sampling ranges, acalibration reference, and a process pressure gauge.

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Transpector CPM Operating Manual

1.3 Using this Operating Manual
Before using this manual, please take a moment to understand the Cautions andWarnings used throughout. They provide pertinent information that is useful inachieving maximum instrument efficiency while ensuring personal safety.
NOTE: Notes provide additional information about the current topic.
HINT: Hints provide insight into product usage.

CAUTION
Failure to obey these messages could result in damage
to the sensor.

WARNING
Failure to obey these messages could result in personal
injury.

WARNING - Risk Of Electric ShockPotentially lethal voltages are present.

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Transpector CPM Operating Manual

1.4 How to Contact INFICON
To contact INFICON regarding Transpector CPM, please use the following contact
information:
INFICON, Inc.
Two Technology Place
East Syracuse, NY 13057
USA
Tel: +315.434.1100
Fax: +315.437.3803
E-mail: reachus@inficon.com
Worldwide customer support information is also available at www.inficon.com
under Contact >> Support Worldwide
Sales and Customer ServiceTechnical Support

Repair Service

If experiencing a problem with Transpector CPM, please have the following
information readily available:


The Transpector CPM serial number

A description of the problem

An explanation of any attempts at corrective actionThe exact wording of any error messages received

1.4.1 Returning Transpector CPM to INFICON
Do not return any component of the Transpector CPM to INFICON without first
speaking with a Customer Support Representative. A Return Material
Authorization (RMA) number must be obtained from the Customer Support
Representative.
If a package is delivered to INFICON without an RMA number, the package will beheld and customer contact will be made. This will result in delays in servicing
Transpector CPM.
Prior to being given an RMA number, a Declaration Of Contamination (DOC) form
may need to be completed if the sensor has been exposed to process materials.
DOC forms must be approved by INFICON before an RMA number is issued.
INFICON may require that the sensor be sent to a designated decontamination
facility, not to the factory.

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Transpector CPM Operating Manual

1.5 Transpector CPM Performance Specifications
1.5.1 General Specifications
Table 1-1 General specifications

Mass Range (AMU)

1 – 100

1 – 200

1 – 300

Resolution<1 AMU wide @ 10% peak height over entire mass range(per AVS 1993 recommended practice)

Total Pressure Range1

5x10-7 –1x10-3 Torr (6.6x10-7 –1.3x10-3 mbar)

Total Pressure
Accuracy2±25% 1x10-6 –1x10-3 Torr (1.3x10-6 –1.3x10-3 mbar)

Maximum Ion Source
Operating Pressure3

1x10-3 Torr (1.3x10-3 mbar)

Nominal Operating
Pressure4

2x10-4 Torr (2.6x10-4 mbar)

System Operating
Pressure

1x10-8 Torr (1.3x10-8 mbar)–1.2 atmospheres (with proper inlet configuration)

Sensitivity

Amps/Torr (Amps/mbar)

Amps/Torr (Amps/mbar)

Amps/Torr (Amps/mbar)@ Low Emission>4x10-6 (>3x10-6)>2x10-6 (>1.5x10-6)>1x10-6 (>7.6x10-7)@ High Emission>2x10-5 (>1.5x10-5)>1x10-5 (>7.6x10-6)>5x10-6 (>3.8x10-6)

1x10-13 Torr

2x10-13 Torr

4x10-13 Torr

(1.3x10-13 mbar)(2.6x10-13 mbar)(5.3x10-13 mbar)

Minimum Detectable
Partial Pressure5
Maximum Data Rate
(analog scans OR
selected peaks)

1.8 ms per point(555 data points per second)

Abundance Sensitivity6<5 ppm<10 ppm<100 ppm

Zero Blast7<2 ppm<25 ppm<200 ppm

Detection Limit8<1 ppm<2 ppm<4 ppmLinearity9

1–5

±20%

Transpector CPM Operating Manual

Table 1-1 General specifications (continued)

Mass Range (AMU)

1 – 100

Minimum Background
Pressure
Maximum Sensor andInlet Temperature1

1 – 200

1 – 300

1x10-8 Torr
(1.3x10-8 mbar)
150°C

Ion source pressure reading @ low emission using total pressure lens2 Total pressure accuracy @ low emission
3

Maximum ion source operating pressure @ low emission
2x10-4 Torr in the ion source will produce about 1x10-5 Torr in the quadrupole region
5 MDPP at the ion source with EM on and 1 s dwell time6
Mass 40 contribution onto 41 AMU
7Zero blast contribution onto 2 AMU
8 Minimal detectable concentration with Krypton in air @ a 1 s dwell time9
For 1 Torr orifices and lower. Linearity @ low emission at 0.1 to 2 times the nominal orifice pressure4

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Transpector CPM Operating Manual

1.5.2 Hex Block Orifice Sampling Inlets
Table 1-2 HexBlock inlets and available orifices (maximum nominal pressure for orifice)

Inlet

Orifices

V1 (LP)

3 mTorr (no orifice)
10 mTorr
15 mTorr
100 mTorr
360 mTorr
1 TorrV2 (HP)

3 mTorr (no orifice)
10 mTorr
15 mTorr
100 mTorr
360 mTorr
1 Torr (bypass)
3 Torr (bypass)
10 Torr (bypass)
30 Torr (bypass)
1 Torr Sniffer (bypass)
3 Torr Sniffer (bypass)
7 Torr Sniffer (bypass)
10 Torr Sniffer (bypass
30 Torr Sniffer (bypass)
100 Torr Sniffer (bypass)V3 (HC)

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1 mTorr (High Conductance)Transpector CPM Operating Manual

1.5.3 Atmospheric Pressure (Capillary) Sampling
Table 1-3 Capillary sampling option

Process Pressure Range(23oC ambient, no purge)

300 to 900 Torr (400 to 1199 mbar)

Capillary Size and Lengths

1/16 in. OD x 1.5 m SS capillary
1/16 in. OD x 3.0 m SS capillary

Process Gas Consumption

2.6 sccm @ 300 Torr (400 mbar)
17 sccm @ 760 Torr (1013 mbar)
30 sccm @ 900 Torr (1199 mbar)

Response Time for Composition
Changes (response to normal inert
gases)

Capillary Delay: t(1.5m) = 0.3 st(3.0m) = 1 sIntermediate Volume Tau = 0.7 s
CPM Isolation time constant = 75 s

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Transpector CPM Operating Manual

1.6 Physical Requirements
1.6.1 Physical Dimensions
Figure 1-1 Pumping system dimensions
545 mm
(21.5 in.)

152 mm
(6.0 in.)

378 mm(14.9 in.)

362 mm(14.3 in.)

183 mm(7.2 in.)Pumping System dimensions
545 x 152 x 378 mm (21.5 x 6.0 x 14.9 in.)
CPM Controller dimensions
195 x 207 x 89 mm (7.7 x 8.1 x 3.5 in.)Foreline Pump dimensions
218 x 150 x 147 mm (8.6 x 5.9 x 5.8 in.)
NOTE: See Figure 2-8 on page 2-10 for cable connections.

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Transpector CPM Operating Manual

1.6.2 Weight
The approximate weight of Transpector CPM (without the Foreline Pump and theCPM controller) is 15.5 kg (34 lb.).
NOTE: This weight does not include connecting cables.

1.6.3 Ventilation Requirements
CAUTION
For adequate ventilation, maintain at least 25.4 mm (1 in.)clearance around the Transpector electronics module,
the CPM heaters and the pumping system.
If enclosing Transpector CPM, the enclosure must be large enough or ventilated toprovide adequate cooling airflow to the fan on the Transpector CPM pumping
system and the fan in the Transpector CPM controller.

1.7 Electrical Power Requirements
The CPM system components that require AC power input are:
CPM controller . . . . . . . . . . . . . . . . . Universal input, any voltage in the range
specified in section 1.7.1.1 is acceptable.
Personal computer . . . . . . . . . . . . . . Universal input, any voltage in the range
specified in section 1.7.1.1 is acceptable.

1.7.1 Required Supply Voltage
Except for the AC power input, the CPM controller supplies all required voltages.
1.7.1.1 Acceptable Supply Voltage Range,

The AC power input must be 100, 120, or 230 V~ ±10%
NOTE: If the input power is less than 100 V~, the time required for the heaters toreach their nominal temperature will be increased.
1.7.1.2 Required Frequency
50 or 60 Hz, ±5%1.7.1.3 Power Rating
CPM controller—500 VA

1 – 10Transpector CPM Operating Manual

1.7.1.4 Fuse Rating

3.15 A @ 250 V~

Interrupt Current 35 A @ 250 V~

Type T (5 x 20 mm)

1.7.1.5 Overvoltage Category
Overvoltage Category II (per EN61010-1:2010)

Short Term: 1440 V < 2 secondsLong Term: 490 V < 5 seconds

1.7.1.6 Electrical Connections
One of the following:

110 V ~, three-pronged, grounded plug230 V ~, European style, two-pronged plug with ground contact

NOTE: Do not replace power cord with an inadequately rated cord. Cord must be
rated 10 A or higher.

1.8 Nitrogen Purge Gas (Corrosive System Only)
The corrosive service Turbo Molecular Pump requires 10 to 25 sccm nitrogenpurge gas flow through its bearings to protect the bearings from corrosion and lossof lubricant by evaporation. The CPM nitrogen regulator range is
10–15 psi (gauge). It is set for 10 sccm flow at the factory.

CAUTION
The corrosive service Turbo Molecular Pump (CVD/Etch),requires nitrogen purge gas flow whenever the system isoperational.
Normally, dry nitrogen is supplied at the acceptable pressure range for the airpressure. (See section 1.10.1 on page 1-13). In this manner, dry nitrogen can besupplied directly to the solenoid valve block and to the pressure regulator via the
supplied 6.35 mm (1/4 in.) tee. The regulator supplies dry nitrogen at a reducedpressure for the purge.

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Transpector CPM Operating Manual

Figure 1-2 Compressed air supply connection

Dry Compressed Air
58–100 psi (gauge)
Recommended Setting
is 75-80 psi (gauge)

Dry nitrogen
58–100 psi (gauge)
Bearing Purge
Corrosive System Only

The pressure range is 58–100 psi (gauge) (4–6.9 bar) [400–690 kPa].
Recommended setting is 75-80 psi (gauge) (5.17 to 5.52 bar) [517 kPa to
552 kPa].

WARNING
Nitrogen pressure must not exceed 100 psi (gauge)(6.9 bar) [690 kPa].

CAUTION
Nitrogen pressure must be at least 58 psi (gauge)(4 bar) [400 kPa].

1.9 Exhaust Gas
Exhausting gas from the Turbo Molecular Pump is required for corrosive
applications. With non-corrosive applications, exhaust the Turbo Molecular Pumpin accordance with the facility's requirements. The dry Foreline Pump has a
6.35 mm (1/4 in.) Swagelok® tube adapter for an exhaust fitting.

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Transpector CPM Operating Manual

1.10 Air Pressure Requirements
1.10.1 Required Air Pressure
Dry compressed air (or dry nitrogen) is used to operate the electro-pneumatic inlet
valves. The minimum air pressure required to operate the inlet valves is
58 psi (gauge) (4 bar) [400 kPa]. Recommended setting is 75-80 psi (gauge)(5.17 to 5.52 bar) [517 kPa to 552 kPa].

1.10.2 Air Pressure Range
The air pressure range is 58–100 psi (gauge) (4–6.9 bar) [400–690 kPa].
Recommended setting is 75-80 psi (gauge) (5.17 to 5.52 bar) [517 kPa to
552 kPa].

WARNING
Air pressure must not exceed 100 psi (gauge)(6.9 bar) [690 kPa].

CAUTION
Air pressure must be at least 58 psi (gauge) (4 bar)[400 kPa].

1.10.3 Moisture Content of Compressed Air Supply
The compressed air supply used for inlet valve operation must be dried to theextent that changes in compressed air pressure during operation will not produce
condensation in lines, solenoids or valve actuators.

CAUTION
Moisture condensation can cause corrosion.

1.10.4 Air Pressure Connections
The compressed air supply connects to the CPM solenoid with 6.35 mm (1/4 in.)polymer hose. The 6.35 mm (1/4 in.) connector is a friction-lock, right-angle fitting
to adapt the supply hose to the solenoid base.

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Transpector CPM Operating Manual

1.11 Vacuum Requirements
1.11.1 Required Vacuum
The Turbo Molecular Pump and Foreline Pump create vacuum. The Foreline Pump
must provide <10 Torr (13 mbar) when there is up to 30 sccm of nitrogen purge plus
process gas bypass flow.

CAUTION
Do not exceed 10 Torr (13 mbar) Foreline Pump pressure.

1.11.2 Acceptable Range Of Vacuum
The CPM manifold can achieve <1x10-8 Torr (1.33x10-8 mbar) of base pressure (nosample flow) after bakeout and cool down. This level of vacuum requires a forelinepressure of <10 Torr (13 mbar).

1.12 Environmental Requirements
1.12.1 Use
Indoor use only.

1.12.2 Altitude Range
Up to an altitude of 2000 m (6561 ft.)
Contact INFICON for operation at higher altitudes.

1.12.3 Maximum Humidity
80% relative humidity (no condensation)

1.12.4 Pollution Degree
Pollution Degree 2 (per EN61010-1:2001)

1.12.5 Maximum Operating Temperature
50°C (122°F) Transpector Electronics Module
35°C (95 °F) for the turbo pump under maximum gas load

1.12.6 Minimum Operating Temperatures
20°C (68°F)

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Transpector CPM Operating Manual

1.12.7 Clean Room Requirements
The CPM is clean room compatible (including silicone rubber heaters).

1.12.8 Anti-Static Conditions
CPM passes standard EN 61326-1:2013.

1.13 Computer System Requirements
The minimum system requirements for FabGuard® Explorer Operating Softwareare listed in Table 1-4:
Table 1-4 Minimum computer requirements for FabGuard Explorer

Parameters

FabGuard Explorer Requirements

Processor

2.4+ GHz Dual Core

Memory4+ GB

Hard Drive

SATA 80 GB to 1 TB 7200+ RPM

Resolution

1024 X 768 16-bit color or greater

Ethernet PortOne free Ethernet port for connection to Transpector CPM

Operating
SystemWindows 7® or Windows 8®

INFICON can supply a controller to run the software that operates
Transpector CPM System. (Refer to section 1.4 on page 1-4.)

1.13.1 Operating System
FabGuard Explorer software requires either Windows 7 or Windows 8 for proper
operation.
See Chapter 10 or the FabGuard Explorer CD for FabGuard Explorer software
operation.

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Transpector CPM Operating Manual

Chapter 2
Installation
2.1 Installation Overview
The Transpector CPM system is partially disassembled for shipping and must be
re-assembled prior to operation. The Transpector sensor is shipped inside theCPM manifold tee, but the remaining components such as the Transpector
electronics module, cable box, CPM controller, diaphragm foreline pump and allconnecting cables will need to be installed per the instructions in this chapter:1 Install the Transpector electronics module, heat guard, and cable box. (Seesection 2.2 on page 2-2.)

2 Install sniffers, if applicable. (See section 2.2 on page 2-2.)
3 Mount CPM to process tool, if applicable. (See section 2.4 on page 2-5.)
4 Install the CPM controller and connect communications cables from the CPM
controller to the Transpector cable box (See Figure 2-6 on page 2-8.)

5 Connect cables on the Transpector cable box to the various CPM sub systems,
and the control computer. (See Figure 2-8 on page 2-10.)

6 Install the CPM Foreline Pump. (See section 2.7 on page 2-11.)
7 Install the software. (See section 2.8, Software Installation, on page 2-11.)

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2.2 Transpector Electronics Module, Heat Guard, and Cable Box
Installation
The Transpector electronics module and cable box must be mounted in an area
where the ambient temperature does not exceed 50°C (122°F) and there is ample
air flow. Best performance is achieved when the electronics module is not exposed
to wide temperature variations.

2.2.1 Attach Transpector Electronics Module
The Transpector sensor is typically already installed inside the CPM Manifold Tee.
The Transpector electronics module must be mounted onto the sensor:

1 The Transpector sensor mounting connector assembly includes a mounting nut
and an O-ring. Place the nut over the end of the sensor and roll the O-ring backto the groove on the sensor. When the mounting nut is tightened, the O-ring
compresses making a tight fit on the sensor housing.

2 Note the recessed area on the sensor feedthrough and the ground tab on theTranspector electronics module. Match the recessed area of the feedthroughto the ground tab and carefully slide the Transpector electronics module fully
onto the sensor.

3 Finger tighten the mounting nut on the Transpector sensor.
Figure 2-1 Transpector electronics module dimensions

CPM Manifold Tee

Mounting Nut

Transpector Sensor

2–2

Cable Box

Transpector Electronics ModuleTranspector CPM Operating Manual

2.2.2 Attach Heat Guard
To decrease the risk of burns when the heating jacket is on, a heat guard isprovided for the metal surfaces between the Transpector electronics box and the
CPM manifold tee.

1 Loosen the single screw that attaches the calibration reference shipping
bracket to remove the bracket. Replace the screw.

2 Attach heat guard between the Transpector electronics module and themounting nut using the two screws provided.

3 Attach calibration reference standard bracket to the heat guard and secure thebracket to the heat guard with the provided screw.
Figure 2-2 Heat Guard and Calibration Reference Bracket

Mounting Nut

Calibration Reference
Shipping Bracket

Transpector Electronics Module

Calibration ReferenceStandard Bracket

Heat Guard

WARNING - High Temperature
Metal surfaces will be hot when heating jacket is on.
Attach heat guard to avoid risk of burns from metal
surfaces between Transpector electronics module and
CPM manifold tee.

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2.2.3 Attach Cable Box
The cable box and Transpector electronics module are connected via an Ethernet
connection, a 15-pin Aux I/O connection, and a 62-pin extended I/O connection.
Three screws are used to stabilize the cable box on the electronics module.
(See Figure 2-3.)
To connect the cable box to the electronics module:

1 Insert the Ethernet jack on the cable box into the Ethernet port on theelectronics module.

2 Carefully insert the 15-pin Aux I/O and 62-pin extended I/O connectors until
they are secure and the Ethernet connector snaps into place.

3 Secure the cable box on the electronics module with the three provided screws.
Figure 2-3 Transpector electronics module and cable box
Screw Holes

Extended I/O

Aux I/O

Ethernet Connection

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Transpector 24V Input

Transpector CPM Operating Manual

WARNING - Risk Of Electric ShockDO NOT remove the cover from the Transpector 24 V
input. 24V is supplied to the Transpector electronics box
from the controller.

2.3 Sniffer Installation
Install the sniffer into the Swagelok® fitting on the hexblock using the 1/4 in.
(6.35 mm) nut and vespel ferrule supplied with the sniffer.

2.4 Mounting the Pumping System
The Transpector CPM system typically mounts directly to a process chamber via
the CF or KF process connection at the end of the Hexblock inlet. Normally there
is no need to use an additional isolation valve between the Hexblock and theprocess chamber.
If an isolation valve is needed and the CPM does not have a CDG interlock for the
Hexblock inlet, it is essential to pump down the volume between the Hexblock andisolation valve from the process side before the CPM is turned on. If this volume is
not pumped down properly filament failure can be the result.

CAUTION
If an isolation valve is used ensure and trapped volumes
are pumped out in order to avoid filament failure.

A support kit is supplied for CPM configurations with a standard processconnection. The support kit, PN 922-209-G1, consists of two 1.22 m (4 ft.) support
legs, two adjustable feet and mounting hardware.

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Transpector CPM Operating Manual

2.4.1 Installing the Support Kit
1 Measure the support leg to make sure there is ample room for installation. The
leg may be cut to size.
NOTE: One end of the support leg has a threaded hole for the adjustable foot.
When cutting the leg, make sure that the threaded hole end is used forthe support.

2 Screw the adjustable foot fully into the bottom of the support leg. (See Figure
2-4.)

3 Install the right angle bracket onto the support leg using the T-nut and bolts
provided. Finger tighten.

4 Install the second bolt and T-nut into the bracket, leaving it loose.
5 Slide the T-nut into the CPM foreline block groove and adjust the position of theleg so that it is perpendicular to the floor with the adjustable foot about 12.7 mm(1/2 in.) from the floor.

6 Tighten all hardware.
7 Install the safety cap.
Figure 2-4 Adjusting leg position

8 Unscrew the adjustable foot until it supports Transpector CPM and relievepressure from the flange.

9 Tighten the lock nut on the adjustable foot against the support leg.
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2.4.2 Atmospheric Support Frame
Atmospheric Transpector CPMsystems do not need the standard support legs. An
atmospheric system is mounted to a support frame, which also houses the CPM
controller. (See Figure 2-5.)
Figure 2-5 CPM configured with support frame for atmospheric sampling

2.5 CPM Controller Installation
The CPM controller is standard 1/2 rack, 2U height rack mountable. The CPM
controller is provided with feet and can sit on the floor or table.
Cable connections on the CPM controller are:

Cable bundle that includes the CPM interface cable (connects to the cable box on
the back of the Transpector electronics module), heater cable, and ground strapForeline pump power cable

CPM Controller power cable

2–7Transpector CPM Operating Manual

The back panel of the CPM controller is shown in Figure 2-6. Connections areshown in Figure 2-8.
Figure 2-6 CPM controller rear panel
Fuse

CPM Interface

2–8

ForelinePower

Main Power
On/OffElectrical
Input

HeaterGroundTranspector CPM Operating Manual

2.6 Transpector Cable Box Connections
The cable box mounted on the back of the Transpector electronics module makes
cable connections to most of the subcomponents of the CPM System. (See Figure2-7. Cable connections for the entire CPM system are shown in Figure 2-8.)


Short Ethernet cable with port (600-1485-P1) attaches to the supplied RJ45,
Cat5e Ethernet cable, which then connects to the control computer. For
networking information, see Chapter 3, Connecting Transpector CPM.



Aux I/O cable (600-1486-P1) is available for User I/O. See section 4.3.1.1 on
page 4-3 for additional information about Aux I/O.



Turbo pump cable (600-1475-P1) connects to the turbo pump controller.

Pirani cable (600-1474-P1) connects to the foreline Pirani gauge.



Solenoid cable (600-1476-P1) connects to the solenoid valve block as well as
the digital pressure switch.



CDG cable (600-1473-P1) connects to the CDG gauge.



CPM cable (600-1472-P1) connects to the CPM interface cable in the cablebundle from the CPM controller.

CPM Control Cable (600-1472-P1)

CDG Cable (600-1473-P1)

Valve Manifold Cable (600-1476-P1)

Turbo Cable (600-1475-P1)
Foreline Gauge Cable (600-1474-P1)

MMSP Aux I/O Cable (600-1486-P1)

MMSP CPM Ethernet Cable(600-1485-P1)

Figure 2-7 Cable box and cables

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Transpector CPM Operating Manual

Figure 2-8 CPM cable connections
Cable Box (Bottom View)

600-1474-P1
CDG
Pirani

600-1475-P1
Molecular
Pump

Turbo
Ctrl

Turbo

IO

Pressure
SwitchEthernet

Valve
Block

600-1476-P1

Foreline Block
Fan
600-1473-P1
1, 3, 5 Or 10 m

600-1130-PX

Cable Bundle
600-1477-Gx

600-1154-PX
Transpector CPM Controller
Gnd

600-1480-PX

AC In
Forepump
CPM
InterfacePower15922-205-GX
Htr

Foreline Pump

9600-1155-P5

2 – 10600-1472-P1

600-1485-P1

Hex
Block
Inlet

600-1486-P1
600-1475-P1
600-1474-P1
600-1476-P1
600-1473-P1

Transpector CPM

Heater Jacket

Cable BoxCPM Sensor

Transpector CPM Operating Manual

2.7 CPM Foreline Pump Installation
The 24 V (dc) dry Foreline Pump has the following connections:Electrical connection to the CPM controllerForeline hose connection from the UHV Turbo Molecular Pump foreline block

Exhaust port connection—required for corrosive or toxic gas sampling. Refer
to appropriate standards such as SEMI S6-0707E for exhaust gas guidelines.

WARNING
Proper exhaust connections must be installed whensampling toxic, corrosive or any hazardous gases toprotect the environment from lethal levels of gas.

CAUTION
If a customer-supplied foreline pump is used, it must
provide a continuous pressure below 10 Torr.
Figure 2-9 Two-stage foreline pump components

Exhaust Port

Foreline
Connection

Foreline Power
Cable

2.8 Software Installation
Refer to the FabGuard Explorer Operating Manual for information regarding
software installation.

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Transpector CPM Operating Manual

Chapter 3
Connecting Transpector CPM
3.1 Introduction
Transpector CPM communicates via Ethernet. Devices on an Ethernet network
have two identifying addresses: an IP address and a MAC address.
IP addresses are assigned to identify individual devices on a network. Eachdevice on an Ethernet network must have a unique IP address.
IP addresses can be reassigned to other devices on the network as long as
each device has a unique IP address.



MAC addresses are unique for each device. MAC addresses are never
duplicated.

3.2 General Networking Information
3.2.1 IP Addresses
IP addresses can be either static or dynamic.
Static (manual) IP addresses are set by the user and are changeable by theuser. Static IP addresses are preferred.

Dynamic (automatic) IP addresses are automatically set by a host or by aserver on a network. Dynamic IP addresses can be set through Dynamic Host
Communication Protocol (DHCP).

NOTE: When using Static IP addresses on a large network (e.g., on a company
network), a block of addresses should be reserved for static IP address
use and prohibited from being assigned by the DHCP server (host). This
will avoid duplicate IP address conflicts.

CAUTIONUse static IP addresses with Transpector CPM. Using
DHCP, the host server may generate a new IP address if
Transpector CPM is taken offline and then returned
online or if there is an IP address conflict on the network.
If the Transpector CPM IP address is randomly changed
during data acquisition, FabGuard will not reconnect tothe new sensor IP address, which will result in a loss ofcommunication and loss of data.
Transpector CPM follows the IPv4 IP address convention. An example IP address
is 192.168.1.100. Each of the four parts is referred to as an “octet”. The
IP address consists of a Network Prefix and a Host Protocol.

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Transpector CPM Operating Manual

3.2.2 Subnetworking
An IP network can be split into multiple subnets. Subnetting sets a region of theIP address as a Network Prefix for all IP addresses inside the subnet through asubnet mask. The subnet mask determines which octets of the IP address areused as the network prefix. (See Table 3-1.)
In order for two network devices to communicate, they must be on the same
subnet, be connected to the same internet network and have the same network
prefix.
NOTE: If two devices have different network prefixes, the two devices are on
different subnets.
Table 3-1 Subnetting

Example 1

Example 2

Example 3

IP address

192.168.1.104

192.168.1.105

192.168.1.150

Subnet mask

255.255.255.0

255.255.0.0

255.255.255.192

Network prefix

192.168.1.0

192.168.0.0

192.168.1.128

Host Protocol

0.0.0.104

0.0.1.105

0.0.0.22

3.3 Transpector CPM IP Address
The default Transpector CPM IP address is 192.168.1.100 with a subnet
mask of 255.255.0.0.
NOTE: When connecting to an existing local network, there must be a static
IP address for each Transpector RGA. Contact the network administrator
for IP address assignments.
Two methods of changing the Transpector CPM IP address are available.


INFICON Mass Spectrometer Search Utility. (See section 3.3.1.)

Transpector Web UI. (See section 3.3.1.2 on page 3-5.)

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3.3.1 Using the INFICON Mass Spectrometer Search Utility to
Change the Transpector CPM IP Address
The INFICON Mass Spectrometer Search Utility (IMSSU) is located on thesoftware installation disk and the RGA Manuals CD. The IMSSU does not need to
be installed. Double-click INFICONMassSpecSearch.exe. The IMSSU will
display. (See Figure 3-1.)
Figure 3-1 INFICON mass spectrometer search utility

The IMSSU detects every Transpector RGA installed on the network regardless of
IP address. The IMSSU will run automatically, or it can be manually started byclicking Search (Clears List). The display shows:3–3Genus (MPCPM for Transpector CPM sensors)Serial NumberCurrent IP addressMAC address



DHCP status (On or Off)Description (user editable)

Transpector CPM Operating Manual

Right-click on a sensor to display the menu shown in Figure 3-2.
Figure 3-2 IMSSU right-click menu

3.3.1.1 Change IP Address

1 Right-click on the sensor and select Change IP Address. The TCP/IP
Properties window will display. (See Figure 3-3.)
Figure 3-3 TCP/IP Properties window

The TCP/IP Properties window displays the:Transpector CPM MAC AddressTranspector CPM IP addressChange To text box, to enter a new Transpector CPM IP address



DHCP On or DHCP Off selection

CAUTIONSet DHCP Off so the IP address cannot be automaticallyassigned.

2 Type the new IP address in the Change To text box.
3 Click Apply. Transpector CPM will automatically reboot and will return online
with the new IP address.

4 Launch Web UI.
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Transpector CPM Operating Manual

3.3.1.2 Launch Web UITranspector Web UI can be launched from inside of the IMSSU. (Refer to the074-581-P1 Transpector Web UI Operating Manual.)
3.3.1.3 Find Device
Find Device On will flash the power indicator on the device. The indicator will flash
for up to 60 seconds and then illuminate.
Find Device Off selected within 60 seconds after selecting Find Device On willstop the search.
3.3.1.4 Show Settings
Click Show Settings to display multiple settings useful for troubleshooting.
The display shows:

3–5Serial Number

Gateway

IP Address



DHCP Status

MAC AddressDescriptionSubnet Mask



Name



DescriptionStructure Version



Name



Box Type



Port



Firmware Version



TCP/IP SourceTranspector CPM Operating Manual

3.4 Connecting Transpector CPM
Before connecting Transpector CPM, decide:Is Transpector CPM going to be on:a private network (installed directly on either a computer or a router that is
not hooked up to the internet), oran internal network where multiple computers are connected with access tothe internet?

Is more than one Transpector CPM sensor being installed at the same time?

3.4.1 Connecting a Single Transpector CPM
3.4.1.1 Single Transpector CPM Direct Connection Installation
When installing a single Transpector CPM on a private network or directly
connected to a computer, changing the IP address of Transpector CPM isnecessary only if the computer being used to connect to Transpector CPM has adifferent network prefix than Transpector CPM.
The network prefix of Transpector CPM is 192.168.x.x. The IP address of thehost computer used to control Transpector CPM must have a subnet mask of
255.255.0.0 and a network prefix of 192.168.x.x.
If this is not the case, change the computer IP address to match the network prefixof Transpector CPM. For example, giving the computer an IP address of
192.168.1.101 will allow Transpector CPM to communicate directly with thecomputer. (See section 3.5, Changing the Computer IP Address, on page 3-8.)
3.4.1.2 Installing a Single Transpector CPM on an Existing Local Network
When installing a single Transpector CPM on an existing local network, the default
IP address of Transpector CPM may not be compatible with the network.
Transpector CPM can have either a Static IP address (recommended) or a
Dynamic IP address set by DHCP (not recommended).
Contact the network administrator for information regarding valid IP addresses andask the administrator to assign an IP address for Transpector CPM. (Refer tosection 3.3.1, Using the INFICON Mass Spectrometer Search Utility to Change theTranspector CPM IP Address, on page 3-3.)

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3.4.2 Installing Multiple Transpector CPM Sensors
Each Transpector CPM is shipped with an identical default IP address. Wheninstalling multiple Transpector CPM, the IP address of each Transpector CPM
must be changed one at a time so that each Transpector CPM has a unique
IP address. (Refer to section 3.3.1, Using the INFICON Mass Spectrometer Search
Utility to Change the Transpector CPM IP Address, on page 3-3.)

CAUTION
Do not connect multiple Transpector CPM to a network
without first changing the IP addresses. Otherwise, there
will be IP address conflicts on the network.

3.4.2.1 Installing Multiple Transpector CPM Directly to a Host Computer
A private local network must be created when multiple Transpector CPM sensors
are connected to a single host computer instead of an existing local area network.
Transpector CPM must be installed on either a router or Ethernet switch. The
router or switch is connected to the host computer through the LAN port of therouter/switch.
3.4.2.2 Installing Multiple Transpector CPM on an Existing Local Network
Use an Ethernet switch instead of a router when multiple Transpector CPM
sensors are connected to an existing local network.

CAUTION
Routers can cause conflicts with local networks because
the router will attempt to set IP addresses for all network
connected devices.
Since Transpector CPM sensors are network connected devices, each sensor
must have an IP address assigned to it by a network administrator. After changing
each IP address manually, connect all of the sensors to the Ethernet switch andconnect the switch to the local network.

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3.5 Changing the Computer IP Address
An alternative to changing the Transpector CPM IP address is to change the hostcomputer’s IP address to allow for communication between the host computer andTranspector CPM.

3.5.1 Windows 7
NOTE: Changing the IP address of the host computer requires administrator
rights.

1 Click Start, then click Control Panel. (See Figure 3-4.)
Figure 3-4 Start menu

2 In the Network and Internet group. click View network status and tasks.
(See Figure 3-5.)
Figure 3-5 View network status and tasks

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3 On the network status and tasks window, click Change adapter settings.
(See Figure 3-6.)
Figure 3-6 Change adapter settings

4 If the host computer is connected directly to Transpector CPM through the
Ethernet port of the computer, right-click Local Area Connection and selectProperties. (See Figure 3-7.)
Figure 3-7 Changing adapter settings

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5 Click Internet Protocol Version 4 (TCP/IPv4).
6 Click Properties. (See Figure 3-8.)
Figure 3-8 TCP/IPv4

7 On the TCP/IPv4 properties window, click Use the following IP address.
(See Figure 3-9.)
Figure 3-9 Use the following IP address

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8 In IP address, type 192.168.1.XXX. The last octet can be any number aslong as it is unique to the network and is not the same as the Transpector CPM
IP address. (See Figure 3-10.)

9 In Subnet mask, type 255.255.0.0.
10 Click OK.
Figure 3-10 Changing the computer IP address

11 The IP address will now be set to the manual IP address chosen in step 7.
12 Exit all menus.
13 Connect to Transpector CPM.
14 To change the IP address back to its default settings, follow steps 1 through 6
and reset the properties to their original settings.

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Chapter 4
How the CPM System Works
4.1 CPM Components
A fully configured CPM corrosive pumping system is illustrated in Figure 4-1. (The
CPM controller and foreline diaphragm pump are not shown.)
Figure 4-1 CPM pumping system components

6

4

5

7

3
2

14

8

1

9
13

10
11

12

1 . . . . . .Process Pressure Gauge
2 . . . . . .Process Connection (CF40, KF40 or KF25)
3 . . . . . .HexBlock™ Inlet
4 . . . . . .Optional Calibration Reference
5 . . . . . .CPM Sensor (inside manifold)
6 . . . . . .Sensor Manifold and Heater
7 . . . . . .CPM Transpector Electronics Module
8 . . . . . .Pressure Switch
9 . . . . . .Valve Solenoids
10 . . . . .Nitrogen Regulator (for nitrogen purge and valve operation)
11 . . . . .Integrated Foreline Block
12 . . . . .UHV Turbo Molecular Pump
13 . . . . .Foreline Pirani Gauge
14 . . . . .Bypass Connection for High Pressure Applications

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4.2 Theory of Operation
Many gas analysis applications involving pressures too high for direct exposure to
the quadrupole sensor (pressures greater than 1.0E-4 Torr/mbar) require apressure converter to reduce the pressure and keep the sensor at high vacuum.
With a pressure converter, a quadrupole sensor may be used for high pressure
applications such as sputtering, Chemical Vapor Deposition (CVD), etch, vacuum
furnace analysis, and laser gas analysis.
Transpector CPM pressure is the pressure inside the closed ion source (CIS). The
nominal operating pressure inside the closed ion source is approximately
2E-4 Torr. Since the conductance between the closed source and the sensor
manifold is 0.7 L/s and given the effective pumping achieved using the turbo
molecular pump attached to this manifold, the pressure in the mass analyzer region
is approximately 23 times lower than in the closed source. Thus, with the source at~2E-4 Torr, the pressure in the manifold is approximately 1.0E-5 Torr.
Pressure converters use orifices and/or capillaries to reduce the partial pressure of
the gas-mixture, typically by a fixed proportion, with minimum mass discrimination.
An orifice, a small disk with a defined hole, acts as a conductance limitation. Whenboth the volume and the high vacuum pump speed are constant, the orifice holesize determines the pressure at the sensor. Orifices are available in various sizes
to cover various pressure ranges.

CAUTION
FabGuard Explorer and FabGuard display total pressure
inside the closed ion source.
Optimum performance is obtained when the totalpressure display reads ~2x10-4 Torr measured in low
energy mode (40 eV, 200 A).
Operation in high energy mode (70eV, 2000 A) will givean inaccurate total pressure reading.

4.3 Instrument Overview
4.3.1 Input/Output (Aux I/O)
This section describes the available input and output (I/O) for Transpector CPM.
See Figure 4-2 for a pinout diagram.
Transpector CPM has two digital inputs for manual emission control, one digital
relay output for emission status, and one analog input.

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4.3.1.1 CPM Aux I/O Connector
User I/O is through a 15 pin DSUB connector on the cable box attached to the backof the Transpector electronics module. (See Figure 2-8 on page 2-10.)
A mating DB15 Male connector is supplied in the ship kit for connecting to theTranspector CPM Aux I/O connections.
4.3.1.2 Two Digital Inputs
Logic Inputs 1 and 2 are by default set to remotely control emission status.
(See Table 4-1.)
Connecting Pin 14 (Logic Input 1) to Pin 15 (Ground) will turn on the emission.

Connecting Pin 13 (Logic Input 2) to Pin 15 (Ground) will turn off the emission.

Table 4-1 Digital inputs

Emission ON

PIN 14Emission OFF

PIN 13GroundPIN 15

CAUTION
Controlling emission through digital inputs bypasses all
software and hardware interlocks. When using digital
inputs for controlling Transpector CPM emission,develop an interlock that will not allow the emission toturn on if the pressure is too high for operation ofTranspector CPM.

4.3.1.3 One Status Relay Output
One status relay output is active (closed) when the emission is on.
See Table 4-2.
Table 4-2 Status relay output

EMISSION ON

Relay closed. PIN 2 and PIN 1 connected

EMISSION OFF

Relay open

CONTACT RATING

24 V(dc) at 0.5 A

NOTE: The status relay is not available when HPR or calibration reference options
are selected.

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4.3.1.4 One Analog Input
One analog input is differential and can handle inputs between 0 to +10 volts andcommon mode voltages of 100 volts. See Table 4-3.
Table 4-3 2 analog inputs

ANALOG INPUT 1

(+)

PIN 9

ANALOG INPUT 1(-)

PIN 10

NOTE: The analog input is supported through FabGuard software.
Figure 4-2 CPM Aux I/O pinout diagram

4.3.2 Ultra-High Vacuum System
The vacuum system provides low pressure to:establish a sample flow from the process by pressure difference.



provide low pressure for optimum operation of the sensor.

A dry pumping system comprised of a Turbo Molecular Pump and Foreline Pump
is used to minimize hydrocarbons in the residual gas background.
The Turbo Molecular Pump provides a high compression ratio between the highvacuum side and the Foreline Pump side for all gases, including hydrogen.
Hydrogen is the major residual gas component in ultra-high vacuum. The highcompression ratio for hydrogen is important for producing a low base pressure.

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4.3.2.1 Foreline Subsystem
The foreline subsystem components include a flexible foreline hose of various
lengths (10 m), a foreline Pirani gauge, and a diaphragm foreline pump.
The Foreline Pump produces base pressures (no gas flow) of 2 Torr, significantly
less than the 10 Torr needed for the Turbo Molecular Pump operation. The 2 Torr
operating pressure for the foreline is in the viscous gas flow regime such that theforeline does not require a large diameter. The inside diameter of the foreline is
6 mm (1/4 in.) which produces a 2 Torr pressure drop across a 10 m length offoreline at 20 sccm of gas flow.
The foreline Pirani gauge can be used to troubleshoot pumping system problems
and to verify that the turbo pump is being backed properly.

4.3.3 Heater(s) Subsystem
The heaters are dual temperature (150°C and 90°C), dual element silicone rubber
pad heaters with silicone rubber foam insulation.
The CPM controller supplies power to the heaters.
Heaters are software controlled at low temperature (90°C) or high temperature(150°C).

WARNING - High Temperature
During or immediately after bakeout, the heating jacket
and metal surfaces in the vicinity of the heating jacket are
hot. These surfaces exceed 100°C at the maximum
ambient operating temperature (50°C), and will causeburns if touched.

4.3.4 CPM Controller Subsystem
The CPM controller contains all of the AC components, the AC-DC converter which
supplies the +24 V (dc) for the Transpector, the Foreline Pump, the Turbo
Molecular Pump controller, and valve solenoids.
The AC-DC converter accepts input voltages ranging 90-240V (ac). The output is
24 V (dc) @ 12A. The output is supplied through the CPM controller interface cableto the Transpector electronics.
The heater drive circuit controls the AC voltage to the heaters. The heaters areinterlocked and will not turn on if the pump is not up to speed or if there are any
faults.

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4.3.5 Solenoid Valves
The solenoid-controlled valves are a group of valves joined together as one
manifold assembly which is mounted to a bracket on the Turbo Molecular Pump
foreline block. The valves are controlled either by the CPM controller rocker
switches or the Valves Aux I/O connector.
When solenoid valves are activated, compressed air from the input air supply(ranging 58–100 psi (gauge) (4–6.9 bar) [400–690 kPa]) will open the appropriate
valve. The recommended setting is 75-80 psi (gauge) (5.17 to 5.52 bar) [517 kPa
to 552 kPa]. All valves are electropneumatically operated. There are six solenoid
valves: (See Figure 4-3.)
V0—Foreline isolation valve and nitrogen purge valve on corrosive systems.
Automatically opened and closed by the start/stop of the pumping system.
V1—Low pressure orifice valve for the HexBlock or the capillary sampling option.
Configured depending on the application. Typically used for backgroundmonitoring.
V2—High pressure orifice valve for the HexBlock or the capillary sampling option.
Typically used for process pressure sampling. User configured depending on theapplication.
V3—High conductance valve (1 mT maximum nominal pressure)
V4—Bypass valve used in conjunction with the high pressure bypass option or thecapillary sampling option
V5—Calibration reference
For more details about the function of each valve, see section 6.1.1 on page 6-2.
NOTE: Each solenoid has a red indicator that illuminates when the solenoid isactivated.
Figure 4-3 Solenoid valve block
Exhaust Muffler
9-Pin D Connector
V3
Air
Lines
To
Valves

V1
V0
V2
V5
V4

Air Supply
Line Connection

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4.3.6 Sensor and Transpector Electronics Module Subsystem
The sensor is a quadrupole partial pressure analyzer that analyzes gases by:

1 Ionizing some of the gas molecules.
2 Separating the ions by mass.
3 Measuring the quantity of ions at each mass.
The masses, unique for each substance, allow the identification of the gas
molecules from which the ions were created. The magnitudes of these signals areused to determine the partial pressures (i.e., amounts) of the respective gases.
The Transpector electronics module mounts to the sensor and provides all of therequirements for operating the sensor, making the appropriate ion current
measurements, communicating to a computer, and sending the resulting output tothe computer.
The Transpector electronics module cable box contains all the cable connections
to the various components of the CPM pumping system, including turbo pump,gauges and solenoid valves. See Figure 2-8 on page 2-10 for a schematic of cableconnections.

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4.4 Application
The pumping system reduces the pressure of process gas to a pressure at the ion
source which optimizes partial pressure measurements. The pressure reduction
orifices produce 2x10-4 Torr pressure in the closed ion source (CIS). The flow rateof gas that produces this pressure is:
Q(T-L/s)= PCIS SCIS
= 2x10-4 (Torr) x 0.7 (L/s)= 1.4x10-4 (T-L/s)
PCIS = the pressure at the CIS ion source within the CPM tee region
SCIS = the pumping speed of the closed ion source
Q = throughput of the CIS ion sourceThis flow rate produced by process gas flowing through the process gas orifice is:
Q(T-L/s) = (PProcess - PCIS ) * CProcess Orifice ~1.4x10-4 (T-L/s)
where the conductance CProcess Orifice determines the orifice diameters needed to
produce this flow for each process pressure.
A selection of orifice diameters are available for reducing pressure for a
multi-decade range of (maximum) process pressures ranging 0.001–100 Torr.
For example, a 10 Torr orifice has a 20 micron diameter hole to produce
approximately 2x10-4 Torr at the CIS when the process has 10 Torr of nitrogen.
Since process pressures can vary within the operating range of the process,different pressure reductions may be needed. The CPM system has a variety of
inlet orifices that allow pressure range sampling which typically covers
measurement of the base pressure of the process chamber (for leak detection andbase vacuum analysis) with a high conductance port and two orifices for processpressures. Various inlet systems are described with their typical use in section 4.5.

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4.5 Sample Inlet Systems and Examples of Use
4.5.1 Inlet System
Figure 4-4 shows the HexBlock inlet.
Figure 4-4 HexBlock inlet

Table 4-4 Inlet system

Hex Block Inlets

Part Number

Hex Block Inlet with one orifice (V1) and high vacuum (V3)923-604-G11

Hex Block Inlet with one orifice (V2) withhigh pressure by-pass (V4) and high vacuum (V3)923-604-G12

Hex Block Inlet with two orifices (V1) and (V2)923-604-G13

Hex Block Inlet with two orifices (V1) and (V2) withhigh pressure by-pass (V4)923-604-G14

Hex Block Inlet with two orifices (V1), (V2),and high vacuum (V3)923-604-G15

Hex Block Inlet with two orifices (V1), (V2) withhigh pressure by-pass (V4), and high vacuum (V3)923-604-G16

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When both volume and high vacuum pump speed are constant, the orifice hole size
determines the pressure at the sensor. Orifices are available in various sizes tocover several pressure ranges. Table 4-5 and Table 4-6 show different orifices for
low and high pressure range application. Figure 4-5 shows pressure ranges forsampling which will assist in choosing the proper orifice for the application.
Table 4-5 Hex block orifices (V1 for low pressure, typically background)

HexBlock Orifices

Part Number

10 mTorr orifice923-706-G6

15 mTorr orifice923-706-G8

100 mTorr orifice923-706-G5

360 mTorr orifice923-706-G7

1 Torr orifice923-706-G4

3 Torr orifice923-706-G9

10 Torr orifice923-706-G3

Table 4-6 Hex Block orifices, sniffers and capillaries(V2 for high pressure, typically process pressure)

Size of Orifices, Sniffers and Capillaries

Part Number

10 mTorr orifice923-706-G6

15 mTorr orifice923-706-G8

100 mTorr orifice923-706-G5

360 mTorr orifice923-706-G7

1 Torr orifice923-706-G4

3 Torr orifice923-706-G9

10 Torr orifice923-706-G3

30 Torr orifice923-706-G10(requires high pressure by-pass)
7 Torr sniffer

923-707-G3(requires high pressure by-pass, 30.5 cm length)
10 Torr sniffer

923-707-G1(requires high pressure by-pass, 5 cm length)
100 Torr sniffer(requires high pressure by-pass, 5 cm length)4 – 10923-707-G2

Transpector CPM Operating Manual

Table 4-6 Hex Block orifices, sniffers and capillaries(V2 for high pressure, typically process pressure)

Size of Orifices, Sniffers and Capillaries

Part Number

30 Torr sniffer

923-707-G4(requires high pressure by-pass, 10 cm length)
300 Torr sniffer

923-707-G5(requires high pressure by-pass, 5 cm length)
30 Torr sniffer

923-707-G6(requires high pressure by-pass, 30.5 cm length)
10 Torr sniffer

923-707-G7(requires high pressure by-pass, 30.5 cm length)

Figure 4-5 Pressure Ranges for Sampling for CPM Inlet Orifices and Sniffers

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4.5.2 High Pressure Sampling: Orifice Bypass (V4)
When process pressures exceed 10 Torr, the process gas is dense enough that thegas molecules collide with each other more often than with the walls of thesampling system. In this transition or viscous flow regime, the time constant for
detecting changes in process gas composition becomes dominated by the time ittakes for the gas species that changes in the process to diffuse through the gas
matrix and arrive at the sampling orifice. This diffusion time is proportional to theprocess pressure and the square of the distance from the process to orifice. This
sampling method effectively shortens the diffusion distance from process change
to the sampling orifice by drawing a small quantity (10 sccm) of the process gas
through the sampling valve and bypass valve to the interstage port of the Turbo
Molecular Pump. When the process gas flows in this manner, the diffusion distanceof the gas is reduced to about 2 cm and the response time for changes in theprocess gas is significantly reduced.

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4.5.3 Dual-Capillary Sampling Option
The Dual-Capillary Sampling option reduces the pressure of a process atmosphereranging 300–1400 Torr to an intermediate pressure that is <10 Torr at the closed
ion source. (See Figure 4-6.) The exit orifice to the pumping line limits the flow to
the Turbo Molecular Pump and establishes the interstage pressure. The capillary
is inserted through the Swagelok® connection fitting. It is locked in place andsealed by tightening the Swagelok nut with a re-usable ferrule.
Figure 4-6 Dual-Capillary sampling option (shown with calibration reference)4 – 13

Transpector CPM Operating Manual

4.6 Advice and Tips
4.6.1 Achieving Good Base Pressure in the CPM
The CPM vacuum manifold must be baked out after initial installation or whenever
the RGA sensor is exposed to air. After an eight hour bakeout and cool down, thebase pressure must be less than 5E-7 Torr at 40 eV, 200 A. If not, examine thebackground mass spectrum to look for the largest peak. If the spectrum isdominated by mass 18, continued bakeout is required to reduce water vapor.

4.6.2 Avoiding Trapped Gas when Sampling Valves are Closed
When V2 is closed, the sampled process pressure is trapped between V2 and O2.
This gas will pump out in a few minutes. It is best to keep V2 open until the processpressure is evacuated. Then open V1 to scan the background spectrum of theprocess vacuum system.

CAUTION
Close the sampling valves when finished withmeasurements to avoid pressure bursts to the RGA if theprocess is vented.
NOTE: CPM will turn off emission and the electron multiplier and close all
sampling valves when a pressure burst occurs.

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Chapter 5
Theory and Application Guide
5.1 Theory of Operation
A Closed Ion Source (CIS) analyzer takes a representative process gas sample
and directs it to the ionization region of a Residual Gas Analyzer (RGA). The
sampling and flow of the gas sample is accomplished by successive reduction ofpressure from the process to the Turbo Molecular Pump through fixed geometry
pump-in channels. Transpector CPM detects levels of impurities in process gasesthat are significantly lower—at sub-ppm levels for many components—than those
detected by open-ion source RGA analyzers.

5.2 Sensors
The three main components of the Transpector CPM sensor are:
ion source (ionizer)

quadrupole mass filter

detector/electron multiplier

These components are mounted on an electrical feedthrough flange bolted to thevacuum manifold. (See Figure 5-1.)
The sensor works only in a high-vacuum environment because the ions, once
created, must not collide with other gas molecules as they move through thesensor.
Figure 5-1 CPM sensor

Ion Source

Mass Filter

Detector / Electron Multiplier

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5.2.1 The Ion Source
The Transpector CPM sensor closed ion source requires a pressure reducing
orifice because process pressures are typically far greater than the maximum atwhich the closed ion source can operate. (See Figure 5-2.)
Figure 5-2 Closed ion source

Sealing Disk

SpringAnode Cylinder

Filament Block
Shield Washer

Anode Plate

Insulator Rings

Focus Plates

Upper Tube Ring

Filament(Electron Repeller not shown)

Inside the closed ion source, a heated filament emits electrons which bombard theincoming gas molecules giving them an electrical charge. While this charge may
be either positive or negative, Transpector CPM detects only positive ions. Once amolecule is charged (ionized), electric fields can be used to manipulate themolecule.
The default filament is made of tungsten. Tungsten offers the best resistance toaggressive gases, particularly those containing fluorine and chlorine. A yttria
coated iridium filament can be used in oxygen or water vapor heavy environments(that will quickly oxidize the tungsten filament).

CAUTION
Tungsten filaments will be destroyed when operated athigh pressure because they react with oxygen and water
vapor at operating temperature.

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The term emission current refers to the stream of electrons emitted by the filament.
Emission current is controlled by the temperature of the filament.
The filament is centered over a hole in the anode cylinder. The potential (voltage)on the anode is positive with respect to the filament. The electron repeller, a flat
plate, is located behind the filament and is electrically connected to the negativeside of the filament. The potential difference between the filament and the anodedetermines the kinetic energy (electron energy) of the emitted electrons. The
electron energy determines how gas molecules will ionize when struck byelectrons.
Electron energy can range from 70 eV down to 10 eV. Operation below 70 eV isrestricted to emission currents of no greater than 200 μA. At 70 eV or above, anemission current of 2 mA will maximize sensitivity for background monitoring andleak checking.
The ions formed within the anode cylinder are pulled away by the potential on thefocus lens and formed into an ion beam. (The focus lens is also called an extractor,
since it extracts the ions from the region in which they are created.) The focus lensfocuses the ion beam into the hole in the source exit lens. To attract positive ions,the focus lens is biased negatively with respect to the anode.
The potential on the source exit lens is negative with respect to the anode and thefocus lens. The ion beam passes through the hole in the exit lens and is injected
into the mass filter.
The closed ion source pumping speed is approximately 0.7 L/s. This will create apressure differential between the ion source and the quadrupole region. The closed
ion source will operate with a maximum process pressure up to about 2 mTorr(2.7E-3 mbar). This ion source is used with an orifice to reduce the high pressure
down to approximately 2E-4 Torr (2.7E-4 mbar). The pressure in the closed ion
source will be about 23 times higher than the pressure in the quadrupole (e.g.,
2.3E-4 Torr in the ion source will produce 1E-5 Torr in the quadrupole region).
See section 6.5, Filament Control, on page 6-7 for more ion source information.

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5.2.2 The Quadrupole Mass Filter
The ions produced in the ion source are injected into the mass filter, which rejects
all ions except those with a specific mass-to-charge ratio. Most ions contain only
one unit of charge. The mass filter is a quadrupole, to which is applied a
combination of RF and DC potentials. The RF frequency and amplitude determine
the mass. The RF/DC ratio determines the filter selectivity. (See Figure 5-3.)
Figure 5-3 The sensor’s quadrupole mass filter

YXZ

The mass filter’s four rods (hence the term quadrupole) are alternately charged todirect ions of specific masses down through the center, deflecting all larger andsmaller masses (hence the term mass filter).
The mass filter consists of four parallel rods, or poles, in a square array. The rods,
and the insulators in which they are mounted, form an extremely precise
mechanical assembly. The distance between the center of the square array and theclosest rod surface is known as the quadrupole radius, r0. Ideally, the rod shouldhave a hyperbolic shape (towards the center of the assembly) rather than round. If
the ratio of the round rod radius to r0 is equal to 1.148, the resulting electric field isa reasonably good approximation of the desired hyperbolic shape.
Opposite rods are electrically connected together. The ions are directed into thespace between the poles in a direction nominally parallel to the length of the rods.
There the ions are separated according to their mass-to-charge ratios by the lateralforces resulting from the potentials applied to the poles.
The applied potentials consist of an RF component and a DC component. The RF
potential on one set of rods is out of phase by 180° with respect to the RF potential
on the other set of rods, but all are the same amplitude. For one pair of rods, the“X” pair, the DC potential is positive. For the other, the “Y” pair, the DC potential isof the same magnitude but negative. The DC and RF potentials are referenced toa center voltage (pole zero).

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The following equations summarize the potentials applied to the rods:

X = V cos  2ft  + U + PZ

[1]

Y = V cos  2ft +   – U + PZ

[2]

V = RF amplitude
f = RF frequencyt = time
U = DC potential
PZ = pole zero.

The RF component removes the low-mass ions from the beam. Ions of sufficiently
low mass have their motions remain in phase with the applied RF. These ions will
gain energy from the field and oscillate with increasingly large amplitudes.
Eventually, as they travel along the length of the rods, they will strike one of therods and be neutralized. High mass ions are focused by the RF component to anarea close to the quadrupole’s long axis, the Z axis.
The DC component is superimposed on the RF to remove high mass ions from thebeam. The DC field deflects the high mass ions toward the negative poles,
opposing the focusing effects of the RF field. Eventually, these high mass ionsstrike the negative rods and are neutralized. By a suitable choice of DC-to-RF ratio,
the mass filter can be made to discriminate against both high and low mass ions.
The ion energy directed along the Z axis of the mass filter is dependent on the
difference between the potential at which the ions were formed (the anode voltage)
and the pole zero. The ion energy is usually only slightly modified by the electricfield (the fringing field) between the source exit aperture and the quadrupole.
Imbalances in the amplitude of the two phases of RF applied to the rod pairs, andDC voltages are also applied, resulting in a further modification of the ion energy.
The mass of the ions passed by the filter is determined by the RF amplitude, theRF frequency, and the quadrupole radius. (See equation [6].)2V = 14.438Mf r 02

[3]

V = peak-to-peak RF amplitude in Volts
M = mass of the ion in atomic mass units (AMU) per electron charge
f = RF frequency in megahertz
r0 = quadrupole radius in centimeters.

For example, a 200 AMU singly-charged ion would pass through a quadrupole withnominal 6.35 mm (1/4 in.) diameter rods (an r0 of 0.277 cm), operating at
1.78 MHz, at a peak-to-peak RF amplitude of approximately 700 Volts.

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The mass of ions transmitted (M) is directly proportional to the RF amplitude(provided f is constant). As the RF amplitude is increased, progressively higher
mass ions will be made to oscillate in phase with the RF field and thus gain
sufficient energy to strike the poles. The DC voltage must be increased to maintainthe high mass rejection properties of the filter. A mass spectrum is generated bysweeping the RF amplitude along with the DC voltage.
The next section (Scanning Characteristics) discusses the variation in theefficiency of transmission of ions through the filter with mass. Following that,
section 5.2.2.2, The Zero Blast, discusses the behavior of the filter at very low
masses where the applied voltages approach zero.
5.2.2.1 Scanning Characteristics
The quadrupole acts as a mass filter for a mixed beam of ions, rejecting those ofboth high and low mass, while passing those of an intermediate mass. The
selectivity of the mass filter is expressed in terms of resolution, R, which isnumerically given by the ratio of the center mass, M, to the width, M (both inAMU), of the pass band. Since the number of the ions passed by the filter falls off
gradually as the edge of the pass band is approached, the width is defined at the
point where the ion current falls to some specified fraction (usually 1/2 or 1/10) of
the maximum value. The width of the pass band is determined by the DC-to-RF
ratio.
The quadrupole can be designed so that R varies in any desired manner with M.
However, keeping M constant ensures adequate separation of masses that are
1 AMU apart. This mode of scanning is called Constant M. As a result, R is
proportional to M, and therefore the efficiency with which ions of mass M aretransmitted through the quadrupole decreases with M. Therefore, the sensitivity ofthe sensor decreases as M increases.

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5.2.2.2 The Zero Blast
When the RGA scans over the very low end of the mass spectrum, the RF and DC
voltages applied to the rods approach zero. The quadrupole then ceases to act asa filter and a large current of unseparated ions is detected, called the zero blast.
(See Figure 5-4.)
Zero blast will interfere with the observation of masses 1 and 2 in the higher
pressure range of the RGA (i.e., 1E-6 Torr to 5E-4 Torr) when significant quantities
of higher-mass ions are present. The zero blast contribution to the mass 2 signal
intensity can be between 5 ppm and 100 ppm depending on the mass range of the
RGA.
Figure 5-4 The zero blast

Zero Blast signal contribution

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5.2.3 The Ion Detector
The ion detector region of the sensor consists of the quadrupole exit lens, theelectron multiplier and the detector itself. The quadrupole exit aperture is biased
negatively with respect to the anode, focusing ions that have been transmitted
through the quadrupole into the electron multiplier and detector.
5.2.3.1 The Electron Multiplier (EM) Detector
The Electron Multiplier (EM) acts as an in situ preamplifier for improved sensitivity.
Incoming ions are accelerated into the EM by a high negative voltage (usually-1.0 kV or more). When an ion strikes the surface of the EM, one or moresecondary electrons are emitted. These electrons are accelerated to a second
surface which is at a more positive potential, where additional electrons are
generated.
This process repeats itself until a pulse of electrons emerges from the output of the
EM and is collected on a Faraday Cup. The result is that as many as a million
electrons or more can be produced by each incident ion. The current output froman EM detector is negative due to this pulse of electrons.
The ratio of the electron output current to the incident ion current is the EM gain.
The gain primarily depends on the EM type, the voltage applied to the EM input,
the voltage applied across the EM, the condition of the EM, and to a lesser extent
the mass and chemical nature of the incident ion. In general, EM gain decreases
as the ion mass increases.
The advantage of the EM detector sensor is it’s high sensitivity (as much as
500 A/Torr), making it possible to measure partial pressures as low as 1x10-15 Torr
for a 100 AMU sensor.

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Transpector CPM Operating Manual

5.2.3.2 The Continuous Dynode Electron Multiplier/Faraday Cup Detector
The Continuous Dynode Electron Multiplier/Faraday Cup (CDEM/FC) detector
amplifies the electron pulse, significantly increasing the analyzer’s sensitivity.
Figure 5-5 CDEM/FC detector
Electron Collector
CDEM Cone

Deflector Shield

Signal Output

The CDEM/FC detector continuous dynode element is a special type of glass,rather than a discrete dynode EM which is a copper-beryllium alloy. The advantageof the CDEM/FC detector over a discrete dynode EM detector is that CDEM/FC
performance does not degrade when exposed to air and does not need to be
stored under vacuum.
The maximum operating temperature for the CDEM/FC detector is 150°C. It canbe baked out at 300°C with the high voltage off.
The CDEM/FC detector is slightly slower to recover after exposure to excessive
input or output currents. It may take a bit longer to stabilize its gain after the highvoltage is changed.
The CDEM/FC detector is operated at high voltages between -0.6 and -2.0 kV.
A new CDEM/FC detector will typically have a gain between 10 and 1,000 at-0.8 kV. The gain at -3.0 kV typically exceeds 1 x 106. The Transpector CPM
default EM voltage is -0.8 kV.

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Transpector CPM Operating Manual

CAUTION
Do not operate the CDEM/FC detector at temperatures
above 150°C. Permanent damage may result.

CAUTION
Avoid output currents in excess of 1 x 10-6 amps.
Either decrease the high voltage or decrease thepressure.
Use the minimum CDEM/FC detector voltage required to obtain the necessary
peak amplitudes and/or signal-to-noise ratio. Operating at higher voltages thannecessary will result in premature aging of the EM. As the CDEM/FC detector
ages, the voltage needed to obtain a specific EM gain will increase.
Since EM performance depends on the condition of its interior surfaces, preventhydrocarbon or other contamination:

Make sure diffusion-pumped vacuum systems are properly trapped to reduceoil back-streaming.



Make sure turbomolecular pumped systems are interlocked to eliminate
mechanical pump oil back-streaming through a nonspinning turbo pump.

EM gain reduction from these kinds of problems can range from 50% to more than90%. The initial gain of the EM is generally high enough to accommodate somedegradation and yet still be usable. With repeated instances of contamination, theEM will eventually require replacement.

CAUTION
In addition to hydrocarbon contamination, an EM can beadversely affected by exposure to highly reactive
chemicals. Avoid any substance that will either cause thedeposition of a surface film on the EM or etch its surface.
Avoid high levels of reactive fluorides, such as tungsten
hexafluoride, hydrogen fluoride, and nitrogen trifluoride.

5 – 10Transpector CPM Operating Manual

5.3 How to Interpret The ResultQualitative Interpretation Of Mass Spectra explains how to determine which
substances are present in the gas sample being analyzed. (See section 5.3.1.)

Quantitative Interpretation of Mass Spectra (Calculating Partial Pressures)
explains how to estimate how much of each substance is present. (See section
5.3.2 on page 5-26.)

Additional Information For Interpreting Mass Spectra provides additional
information regarding interpreting mass spectra. (See section 5.3.3 on page5-32.)

Software packages for Transpector instruments include routines which serve asaids in the interpretation of spectra and the calculation of partial pressures andrelative concentrations.
For a discussion of how the Transpector produces its measurements, see Chapter
4, How the CPM System Works.

5.3.1 Qualitative Interpretation Of Mass Spectra
The graphical output of a partial pressure analyzer is a mass spectrum. A mass
spectrum is a pattern of peaks on a plot of ion intensity as a function of ion
mass-to-charge ratio. Each chemical substance has a characteristic mass
spectrum. Different instruments will give slightly different spectra for the same
substance. The particular characteristics of the ionizer, mass filter, detector, andthe manner in which the sample is introduced into the mass spectrometer all
influence the spectrum that is produced.
Rarely will a mass spectrum be obtained for a pure substance. Most of the time(especially for residual gas analyzers), the spectrum obtained will be a compositeof the individual substances which together comprise the actual sample present.
Figure 5-6 shows the mass spectrum of air. The top graph shows the mass
spectrum of a single scan during the data run with the raw signal data on the y-axis
and the mass data on the x-axis. The prominent peaks for air are mass 28 (N2),
mass 32 (O2), mass 40 (Ar) and mass 18 (H20). Also notice the N and O peaks at
masses 14 and 16 respectively. These are created when N2 and O2 are broken
apart in the ion source. The bottom graph is a trend analysis showing a few
selected mass signals versus time.

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Transpector CPM Operating Manual

Figure 5-6 Air mass spectrum

N2

O2
N
O

5 – 12

H2O

Ar

Transpector CPM Operating Manual

5.3.1.1 Ionization Process
When a sufficiently energetic electron strikes a gas molecule, there are many
processes that can occur, some of which are summarized in Table 5-1.
Table 5-1 Electron Impact Ionization Processes

XYZ + e- 
XYZ+ + 2e-(1)

XYZ2+ + 3e-(2)

XY + Z+ + 2e-(3)

XY+ + Z + 2e-(4)

X+ + YZ + 2e-(5)

X + YZ+ + 2e-(6)

XZ + Y+ + 2e-(7)

XZ+ + Y + 2e-(8)

In all cases, the reactants are a high energy electron (e-) and a gas molecule(XYZ). The products of the first reaction are the molecule with a single electron
removed (the parent ion) and two low energy electrons. In the second reaction, twoelectrons are removed from the gas molecule, resulting a doubly charged ion.
Triply (or even more highly) charged ions are possible, provided the incident
electron has enough energy.
Reactions 3 through 8 are examples where the original molecule is broken intofragments, at least one of which is positively charged (negative ions can also be
produced in this manner). Only the positive ion fragments are observed; the neutral(uncharged) fragments are not detected. The mass spectrum obtained when theparent molecule breaks apart under electron impact is commonly referred to as thefragmentation pattern (or cracking pattern). The fragmentation pattern for nitrogenat an electron energy of 70 eV is displayed in Figure 5-7.

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Transpector CPM Operating Manual

Figure 5-7 A nitrogen fragmentation pattern
14

N2+

14N+
14N15N+

This nitrogen fragmentation pattern shows 14N+ (14 AMU), 14N2+ (28 AMU), and14 15 +N N (29 AMU).
In general, peaks from multiple charged species will be less intense than those forthe corresponding singly charged ion. For example, the doubly charged peak forargon is typically less than one fifth as intense as the singly charged peak (thisintensity ratio is sensitive to the incident electron energy).
There are some situations when it is difficult to determine whether the ion is singly
or multiply charged. When a molecule is comprised of two atoms of the sameelement, the typical partial pressure analyzer cannot distinguish between the singly
charged one-atom fragment ion and the doubly charged two-atom molecular ion,
which will both have the same mass-to-charge ratio. Refer to Figure 5-7. The peakat 28 AMU is the parent ion, N2+. It is not discernible from this spectrum if the peakat 14 AMU is from N+ or N22+. The 14 AMU peak in the nitrogen spectrum is fromthe singly charged fragment ion.
Most ions (with the important exception of complex hydrocarbons) have masses
very close to integer values. When the mass of an ion is not evenly divisible by the
number of charges on it, the mass-to-charge ratio will not be an integer. Thus, Ar3+
will appear at 13.33 AMU, while F2+ will appear at 9.5 AMU.

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Transpector CPM Operating Manual

5.3.1.2 Isotope Ratios
An additional cause of multiple peaks in the mass spectrum of a pure substance isthat most elements are comprised of more than one isotope. For example, 99.63%
of all nitrogen atoms in nature have a mass of 14 AMU; only 0.37% have a massof 15 AMU. Examine the nitrogen spectrum in Figure 5-7. The largest peak at
28 AMU is the parent ion, N2+. The peak at 29 AMU is the isotope peak, 14N15N+,
and is 0.74% (two times 0.37%) as high as the parent peak since there are twonitrogen atoms in the ion, each one of which has a 0.37% chance of being 15 AMU.
Some elements have many intense isotopes. For example, xenon is0.096% mass 124, 0.090% mass 126, 1.92% mass 128, 26.44% mass 129,
4.08% mass 130, 21.18% mass 131, 26.89% mass 132, 10.44% mass 134,
and 8.87% mass 136.
Isotope ratios, like fragmentation patterns, aid in recognizing specific materials.
Under normal partial pressure analyzer ionization conditions, the peak height ratios
for the various isotopes of an element will be the same as the ratios of their naturalabundance’s. For example, the probability of ionizing the mass 35 isotope ofchlorine (35Cl) is the same as the probability of ionizing the mass 37 isotope (37Cl).
Thus, the peak height ratio of mass 35 to 37 from HCl will be 3.07 to 1
(75.4% / 24.6%).
Table 5-2 lists the isotopic ratios for lighter elements. For a complete listing of thenatural abundances for the isotopes of all the elements, see the Handbook ofChemistry and Physics from CRC Press.
Table 5-2 Isotope ratios

Isotope Ratios
Element

Mass No.

Relative
AbundanceH1

99.985

2

0.015

3

0.000134~100.0

10

19.78

11

80.22

12

98.892

13

1.108

14

99.63

15

0.37

He

B

C

N

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Transpector CPM Operating Manual

Table 5-2 Isotope ratios (continued)

Isotope Ratios
Element

Mass No.

Relative
AbundanceO16

99.759170.0374180.2039

F

19

100.0

Ne

20

90.92

21

0.257

22

8.82

Na

23

100.0

Al

27

100.0

Si

28

92.27

29

4.68

30

3.05

P

31

100.0

S

32

95.06

33

0.74

34

4.18

36

0.016

35

75.4

37

24.6

36

0.337

38

0.063

40

99.600ClAr

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Transpector CPM Operating Manual

5.3.1.3 Electron Energy Effects
The exact fragmentation pattern will depend on the energy of the bombarding
electrons. Figure 5-8 graphs the number of argon ions (of different charge states)
produced per incident electron per Torr of gas pressure as a function of electronenergy.
Figure 5-8 Electron energy effects

12
10

Ar +

N

8
6
Ar 2+

4

Ar 3+ x10

2
0

100

Ar 4+ x100

200
300
Electron Energy (eV)

400

500

From a paper by W. Bleakney, Physical Review, 36, p. 1303, published in 1930.

This graph shows the number or argon ions, N, formed per electron per Torr at
0°C versus electron energy.
The appearance potential—the minimum electron energy required to produce a
specific ion—for Ar+ is 15.7 eV. The number of argon ions produced rises steeply
with energy until a maximum is reached at about 55 eV. As the electron energy
rises above this level, the rate of Ar+ production slowly decreases.
Typically in mass spectrometry, electron impact ionization is carried out at anelectron energy of 70 eV for two reasons:

70 eV is above the minimum energy required to produce at least some positive
ions from any sufficiently volatile chemical species.

70 eV is near the energy at which the rate of ion production is at its maximum
for most of the common gases.

Operating at 70 eV provides a universal detector with good sensitivity for gases
typically encountered.

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Transpector CPM Operating Manual

Sometimes there is a problem with mass spectral overlap—ions with differingchemical composition form chemically distinct source molecules, but with the same
mass. For example, there is a problem with detecting small amounts of water vapor
in argon, as is often desired when monitoring a PVD process. Normally, water
vapor is monitored at 18 AMU (H2O+). Overlap from the doubly charged argon36
isotope also shows up at mass-to-charge ratio 18 (most mass filters, including
quadrupoles, are really mass-to-charge ratio filters and not true mass filters).
Approximately 3,400 parts per million of all argon atoms are the mass 36 isotope.
Also, at 70 eV, the doubly-charged argon ion, Ar2+, has about 15% of the intensityof the singly charged Ar+ ion. Therefore, there will be approximately 510 ppm(3,400 ppm times 15%) of 36Ar2+ at 18 AMU, making it impossible to detect several
ppm of water vapor at the same mass. Another ion from water vapor, the OH+ at
17 AMU, could be used instead. Unfortunately, OH+ at 17 AMU from water vapor
has an intensity of only 25% of that of the parent ion H2O+. To detect several ppm
of water vapor would require the detection of less than one ppm of current at
17 AMU. This is difficult because there will be some tailing of the 510 ppm 36Ar2+
peak at 18 AMU onto 17 AMU.
The best solution to this argon/water vapor problem is to make use of a property ofions known as appearance potential. The appearance potential for an ion from agiven substance is the minimum electron energy required to produce that particular
type of ion from the specified substance. Table 5-3 lists appearance potentials forvarious ions from common gases.
Table 5-3 Appearance potentials for various ions from common gases

5 – 18Ion

Gas

Mass-to-Charge Appearance Potential (eV)

Ar+

argon

40

15.7

Ar2+

argon

20

43.5

Ar3+

argon

13.3

>70

N 2+

nitrogen

28

15.6

N+

nitrogen

14

24.3

O 2+

oxygen32

12O+

oxygen

16

14.01

CO2+

carbon dioxide

44

13.8

CO+

carbon dioxide

28

19.4

O+

carbon dioxide

16

19.4

C+

carbon dioxide

12

22.7

CO+

carbon monoxide

28

14.1

O+

carbon monoxide

16

20.9

C+

carbon monoxide

12

20.9

Transpector CPM Operating Manual

Table 5-3 Appearance potentials for various ions from common gases

Ion

Gas

Mass-to-Charge Appearance Potential (eV)H 2O +

water vapor

18

12.6

OH+

water vapor

17

13.5

H 2+

hydrogen

2

15.5

HF+

hydrogen fluoride

20

16.1

Table 5-3 shows that the appearance potential for Ar2+ is 43.5 eV, while that for
H2O+ is 13.5 eV. Therefore, by choosing an electron energy below 43.5 but above
13.5 eV, it is possible to produce the water vapor ion without producing doubly
charged argon ions, permitting the detection of water vapor at 18 AMU.
The Transpector CPM sensor and electronics can operate at electron energies
below 70 eV, with reduced electron emission (200 μA, max.). When monitoring
PVD processes, the CPM should be operated at 40 eV with an electron emission
current of 200 μA to reduce power to the filament. The software has the capability
to switch the CPM between 70 eV, 2.0 mA (CIS high) for background monitoringand 40 eV, 200 μA (CIS low) for process monitoring.
With FabGuard Explorer, electron energy can be changed to a voltage ranging 10–
100 eV.

CAUTION
Below 70 eV it is necessary to limit the electron emission
current to no more than 200 μA, in order to not overpower
the filament. Overpowering the filament will result inshortened filament life.

5.3.1.4 A Qualitative Interpretation Guide
A partial pressure analyzer identifies unknown substances by interpreting threecharacteristics: fragmentation patterns, multiply charged ions, and isotope ratios.
Simple spectra are easy to interpret. The analysis of complicated mixtures is moredifficult.
Table 5-4 is a spectrum interpretation guide for examining an unknown spectrum.
It lists the masses of peaks, possible ion identities for each of these masses, andcommon sources for each of these ions. This guide is by no means all-inclusive,and only goes up to 50 AMU. Processes such as CVD and Etch often involve fairly
complex chemicals which provide very complicated spectra that extends to masses
well beyond 50 AMU.

5 – 19Transpector CPM Operating Manual.

Table 5-4 Spectrum interpretation guide

AMU #Chemical Symbol

Sources1

Hwater F or hydrogen F2

H 2, Dhydrogen, deuterium (2H)

3

HD, 3Hhydrogen-deuterium, tritium (3H)

4He

helium5

No known elements

6C

Doubly Ionized 12C (Rare)7

N

DI 14N (Rare)8O

DI 16O (Rare)9

No known elements

10

Ne, 10B

DI 20Ne (Rare), BF3, BCl3

11

Ne, 11B

DI 22Ne (Rare), 11BF3, BCl3

12Ccarbon, carbon monoxide F,
carbon dioxide F

13

CH, 13C

methane F, carbon isotope

14

N, CH2

nitrogen, methane F or Note 1

15

CH3

methane F or Note 1

16

O, CH4, NH2

oxygen or carbon monoxide F, ammonia

17

OH, NH3

water F, ammonia F

18

H 2O

water

19

F

fluorine or freon F

20Ar2+, Ne, HF

argon Dl, neon, hydrofluoric acid22

neon, DI CO2

21
22

Ne, CO2

23

5 – 2024

C2

See Note 1

25

C 2H

See Note 1

26

C2H2 CN

See Note 1, hydrogen cyanide F

27

C2H3, Al, HCN

See Note 1, aluminum, hydrogen cyanide

28

N2, CO, C2H4, Si

nitrogen, carbon monoxide, ethylene P,
siliconTranspector CPM Operating Manual

Table 5-4 Spectrum interpretation guide (continued)

AMU #Chemical Symbol

Sources29

CH3CH2ethane F or ethanol F or isopropyl alcohol

30

C2H6, NOethane P, nitric oxide

31

P, CH2OH,

phosphorus, methanol F,

32

O2, S

oxygen, sulfur, methanol P

33

HShydrogen sulfide F

34

H2S, 34S, O2hydrogen sulfide P, sulfur isotope,
oxygen isotope

35

35

chlorine isotope, See Note 2

36HCl, 36Ar, C3hydrochloric acid, argon isotope,hydrocarbons

37

37Cl, C H
3chlorine isotope, See Note 2, hydrocarbons

38

37hydrochloric acid or see Note 2,hydrocarbons

39

C 3H 3

See Note 3, hydrocarbons

40

Ar, C3H4

argon, See Note 1, hydrocarbons

41

C 3H 5

See Note 1, hydrocarbons

42

C 3H 6

See Note 1, hydrocarbons

43

C3H7, CH3CO

Note 1, acetone F or methyl ethyl ketone F

44

CO2, C3H8

Carbon dioxide, See Note 3

45

CH3CH2O

ethanol F or isopropyl alcohol F

46

CH3CH2OH

ethanol P

47

C35Cl

See Note 2

48

HC35Cl, SO

See Note 2, sulfur dioxide F

49

C37Cl

See Note 2

50

C37Cl, CF2, C4H2

See Note 2, freon F, Note 3

Cl

HCl, C3H2

NOTE: (1) Fragments of several hydrocarbons, such as mechanical pumpoil, diffusion pump oil, vacuum grease, cutting oil, and organic
solvents.
(2) Fragments of several chlorinated hydrocarbons, such as carbon
tetrachloride, tichloroethylene, and many freons.
(3) Fragments from both straight chain hydrocarbons and benzene
ring hydrocarbons.
(4) F = Fragment ion; P = Parent ion; DI = Doubly ionized

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Transpector CPM Operating Manual

5.3.1.5 Dry Etching Chemistries
Table 5-5 lists materials to be etched, the typical chemistries used, the chemical
species that are important, and a list of masses used to monitor each specie.
Many different chemistries exist for etching any given film. Only a few of the morecommon etch processes are listed in Table 5-5. The important species listed foreach process were picked for the list on the basis of their either being reagent
gases for the listed process, known reaction product gases, potentiallytroublesome impurities (e.g., H2O), or probable by-product gases.
Table 5-5 is not an all-inclusive list. There may be other important species, such as
highly reactive intermediates, which are not included. The list of monitored masses
for each process is a general guide.
Significant spectral overlap exists (for example, COF2 and SiF4 or CO, CO2 andN2), which must be considered when interpreting the data. Furthermore, many
cracking patterns for the important species are very complicated because of themolecule’s complexity and because of multiple isotope peaks. Only a few of themore intense or unique masses are listed.
Table 5-5 Dry etching chemistries

EtchedMaterial

TypicalReagents

ImportantSpeciesMonitored
MassesAl (and alloys)

BCl3/Cl2 (+N2)

BCl3

81, 83, 116, 118, 46, 48

Cl2

70, 72, 74

N2

28, 14O2

32, 165 – 22AlCl3134, 97, 62, 27

Al2Cl6

266, 231, 196, 161, 134, 97, 62

HCl

36, 38H 2O

18, 17

Transpector CPM Operating Manual

Table 5-5 Dry etching chemistries (continued)

EtchedMaterial

TypicalReagents

ImportantSpeciesMonitored
MassesW (and alloys)

SF6

SF6

127, 89, 108

WF6279, 281

F2

38

HF

20

H 2O

18, 17O2

32, 16N2

28, 14WOF4257, 259

TiF4

86, 67, 105, 48

NF3

52, 33, 71

WF6279, 281(TiN liner)

W (and alloys)

NF3(TiN liner)

F2

38

HF

20

H 2O

18, 17N2

28, 14O2

32, 16WOF4257, 259

TiF4

86, 67, 105, 48

SiO2

CHF3/CF4,

CHF3

51, 69(andboro-phospho-s
ilicate glass)

CHF3/O2

CF4

69, 50O2

32, 16

SiF4

85, 66, 47

CO2

44, 28, 16, 12

HF

20

H 2O

18, 17

COF2

47, 66

C 2F 6119

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Transpector CPM Operating Manual

Table 5-5 Dry etching chemistries (continued)

EtchedMaterial

TypicalReagents

ImportantSpeciesMonitored
Masses

Si3N4

CF4/O2

CF4

69, 50, 31

Poly-Si

BCl3/Cl2

HBr/Cl2/O2

O232, 16

SiF4

85, 66, 47

NF3

52, 33, 71

CO2

44

HF

20

H 2O

18, 17

COF2

47, 66N2

28, 14CO28, 12

BCl3

81, 83, 116, 118, 46, 48

Cl2

70, 72, 74

SiCl4133, 135, 170

HCl36, 38H 2O

18, 17

HBr

80, 82Cl270, 72, 74

O2

32, 16SiCl4170, 133, 135

SiBr4348, 267, 269

SiBrXCl(1-X)

many peaks

H 2O

18, 17

HCl

36, 385.3.1.6 Tungsten CVD
Table 5-6 lists some of the materials of interest and the masses at which to monitor
them for blanket tungsten or tungsten silicide deposition. Oxygen and water vapor
are unwanted contaminants during tungsten deposition because they react with thetungsten hexafluoride to produce tungsten oxyfluorides and oxides, which, except
for WOF4, are nonvolatile and can result in particle generation. The presence of

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Transpector CPM Operating Manual

WOF4 may be the only indication that water vapor or oxygen are also present, but
not detected by the mass spectrometer because of rapid reaction with the tungsten
hexafluoride.
Table 5-6 Tungsten CVD materials of interest

ChemicalType

Monitoring Mass

WF6

reagent279

H2

reagent2

SiH4

reagent

30, 31, 32

Ar

reagent

40

N2

reagent

28(interference from SiH4)

HF

product

20 (at 35 eV)O2contaminant

32(interference from SiH4)

H2O

contaminant

18 (at 35 eV)

WOF4by-product257

5.3.1.7 Copper MOCVD
Table 5-7 lists some of the materials of interest and the masses for monitoring themfor the deposition of copper using CuI(hfac)(tmvs). Oxygen and water vapor are
unwanted contaminants.
Table 5-7 Copper MOCVD materials of interest

Chemical

Types

Monitoring Mass

CuI(hfac)(tmvs)

reagent

201, 63

H2

reagent

2

Ar

reagent40

tmvs

product

100, 85H(hfac)product

139

O2

contaminant

32

H2O

contaminant18(if Ar present, use 35 eV)

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Transpector CPM Operating Manual

5.3.2 Quantitative Interpretation of Mass Spectra(Calculating Partial Pressures)
Partial pressure is defined as the pressure of a designated component in a gas
mixture. By Dalton’s Law, the sum of all the partial pressures is the total pressure.
The partial pressure analyzer is designed so that the height of a peak in a mass
spectrum is proportional to the number of ions giving rise to that peak. The numberof ions is more or less proportional to the partial pressure of the substance giving
rise to that peak (over some specified operating pressure range). Therefore, theheight of a peak is proportional to the partial pressure of the substance giving riseto that peak.
Equation [4] shows the relationship between the partial pressure of substance a
determined by measuring the ion current at mass b:

PP a = K ab  I ab

[4]

PPa = the partial pressure of substance a
Kab = the proportionality constant for the peak at mass b from substance a
Iab = the ion current at mass b from substance a

The proportionality constant (Kab) depends on the nature of the substance being
detected and on the characteristics of the partial pressure analyzer. The substancedependent part is called the material factor (Mab). The instrument dependent partis called the analyzer factor (Ab) and depends primarily on the ion mass (b).
Therefore, the original equation [4] can therefore be rewritten as follows:

PP a =  M ab  A b   I ab

[5]

The material factor (Mab) depends on the fragmentation pattern for the particular
substance, the fragmentation pattern for a reference gas (usually nitrogen), and theease with which the substance can be ionized relative to the same reference gas.
The relationship is shown in equation [6]:1
M ab = -----------------------------FF ab  XF a

[6]

The fragmentation factor for substance (a) at mass (b) is (FFab). It is equal to thefraction of the total current of all ions from substance (a) which have a mass (b).
The ionization probability of substance (a), relative to nitrogen (i.e., XFN =1) is(XFa). That is, it is the ratio of total ion current (for all masses) from substance (a)to the total ion current from nitrogen (N), both measured at the same true partialpressure. Both fragmentation factors and ionization probabilities depend strongly
on the energy of the ionizing electrons. If the correct values of these factors are notknown for the exact conditions of the particular analyzer being used, they can beapproximated using published values for other conditions with, generally, only asmall loss in accuracy.

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Transpector CPM Operating Manual

Fragmentation factors can be calculated from fragmentation patterns given in thegeneral references cited in Chapter 12, Bibliography. Other valuable references
include the Index of Mass Spectral Data from ASTM, and EPA/NIH Mass Spectral
Data Base by Heller and Milne and an extensive library of spectra is available fromthe National Institute of Standards and Technology.
Table 5-8 lists the fragmentation factors (FF) for the major peaks for selected
substances.
NOTE: Actual fragmentation factors vary significantly depending especially on theionizer, electron energy, and mass filter turning. For best accuracy,
measure fragmentation factors with the same instrument used for the
analysis, under the same tuning conditions.

5 – 27

Transpector CPM Operating Manual.

Table 5-8 Typical fragmentation factors for the major peaks of some common substances(at 70eV electron energy)

Mass

FF

acetone: (CH3)2CO

Mass

FF

helium: He

43

.46

4

58

.11

42

.03

hydrogen: H2

27

.05

2

FF

oxygen: O2
1.00

1.00

argon: Ar

32

.82

16

.18

toulene: C6H5CH3
91

.33

92

.24

39

.07

40

.87

krypton: Kr

20

.13

84

.45

65

.04

86

.13

63

.03

82

.10

83

.10

benzene: C6H6
78

.43

51

.09

52

.09

methane: CH4

50

.08

16

carbon dioxide: CO2

trichlorethylene: C2HCl3
130

.17

95

.16

.44

132

.16

15

.39

97

.10

14

.09

60

.08

44

.86

13

.05

28

.06

12

.02

water: H2O

16

.05

17

.01

18

.77

12

.01

17

.21

16

.02

methanol: CH3OH
carbon monoxide: CO

31

.31

28

.87

32

.21

xenon: Xe

12

.08

29

.07

132

.26

16

.04

28

.04

129

.26

29

.01

131

.22

134

.11

136

.09

neon: Neethanol: C2H5OH

5 – 28

Mass

20

.91

22

.09

31

.45

45

.22

46

.08

nitrogen: N2

27

.07

28

.87

29

.05

14

.12

29

.01

Transpector CPM Operating Manual

Ionization probability factors can be approximated by substituting the relative ion
gauge sensitivities for various gases. Table 5-9 lists relative ion gauge sensitivities
for some common gases.
NOTE: Table 5-9 lists relative ionization gauge sensitivities for selected
molecules. The data was compiled from Empirical Observations on theSensitivity of Hot Cathode Ionization Type Vacuum Gauges by R. L.
Summers (NASA Technical Note NASA TN D5285, published in 1969).
Similar, although more limited, lists of ionization sensitivities can be foundin the books by O’Hanlon, and Drinkwine and Lichtman. (See Chapter 12,
Bibliography.)
HINT: Actual ionization probabilities vary significantly depending especially on theionizer and the electron energy. For best accuracy, measure the relative
ionization probability using a hot cathode ionization gauge (calibrated fornitrogen) to monitor a known pressure of the substance of interest. The
ratio of the gauge reading to the known true pressure is the relative
ionization probability. To determine the true pressure, use a gauge which isgas species independent (e.g., a capacitance manometer) or a gauge witha known sensitivity factor (e.g., a spinning rotor gauge).
Table 5-9 Ionization Probabilities For Some Common Substances

Substance

FormulaRelative
Ionization
Gauge
Sensitivity

Substance

FormulaRelative
Ionization
Gauge
Sensitivity

acetone(CH3)2CO

3.6hydrogen chloride

HCl

1.6

1.0

hydrogen fluoride

HF

1.4

air
ammoniaNH3

1.3hydrogen iodide

HI

3.1

argon

Ar

1.2

hydrogen sulfide

H 2S

2.2

benzeneC 6H 65.9

kryptonKr

1.7

benzoic acid

C6H5COOH

5.5

lithiumLi

1.9

bromineBr2

3.8

methaneCH4

1.6

butaneC4H10

4.9

methanol

CH3OH

1.8

carbon dioxide

CO2

1.4

neon

Ne

0.23

carbon disulfide

CS2

4.8

nitrogenN2

1.0

carbon monoxide

CO

1.05

nitric oxide

NO

1.2

carbon tetrachloride

CCl4

6.0

nitrous oxide

N 2O

1.7

chlorobenzene

C6H5Cl7.0

oxygenO2

1.0chloroethane

C2H5Cl4.0

n-pentane

C5H12

6.0

chloroform

CHCl3

4.8

phenolC6H5OH

6.2

chloromethane

CH3Cl

3.1

phosphine

PH3

2.6

5 – 29Transpector CPM Operating Manual

Table 5-9 Ionization Probabilities For Some Common Substances (continued)

Substance

FormulaRelative
Ionization
Gauge
Sensitivity

Substance

FormulaRelative
Ionization
Gauge
Sensitivity

cyclohexane

C6H12

6.4

propaneC 3H 8

3.7

deuterium

D2

0.35

silver perchlorate

AgClO43.6

dichlorodifluormethane

CCl2F2

2.7

stannic iodide

Snl4

6.7

dichloromethane

CH2Cl2

7.8

sulfur dioxide

SO2

2.1

dintrobenzene

C6H4(NO2)2

7.8

sulfur hexafluoride

SF6

2.3

ethaneC 2H 6

2.6

tolueneC6H5CH3

6.8

ethanol

C2H5OH

3.6

trinitrobenzene

C6H3(NO2)39.0

ethylene oxide(CH2)2O

2.5

water

H 2O

1.0

helium

He

0.14

xenon

Xe

3.0

hexaneC6H14

6.6

xyleneC6H4(CH3)2

7.8hydrogenH2

0.44

The analyzer factor, Ab, depends on the transmission and detection characteristicsof the analyzer, the EM gain (if the analyzer is so equipped), and the basic
sensitivity. (See equation [7].)1A a = --------------------------------------------------TF b  DF ab  G  S[7]The transmission factor of the mass filter at mass (b) is (TFb). The transmission
factor is the fraction of ions at mass (b) which pass through the mass filter, relative
to nitrogen ions at mass 28. Nominally, the transmission factor is equal to 28
divided by the mass of the ion (b).
The detection factor (DFab) is equal to 1 for a Faraday Cup detector. For an EM,
the detection factor is a function of the mass of the ion and its chemical nature, andis measured relative to that of a reference gas, typically nitrogen. In general, as themass ion increases, the EM detection factor decreases.
The gain of the EM (G) measured at mass 28 for nitrogen, is the EM output current
divided by the Faraday mode output current, under otherwise identical conditions.
The multiplier gain is a strong function of the high voltage applied.
The sensitivity of the instrument (S) is the Faraday mode ion current from a given
pressure of pure nitrogen measured at mass 28, and is typically expressed in
A/Torr.

5 – 30Transpector CPM Operating Manual

The overall relation between partial pressure and ion current, given in equation [8],is quite general. The constants for this equation can be obtained from various
tables, but for the best accuracy, they should be measured for each instrument.

FF N28PP a =  -------------------------------------------------------------------------------------------   I ab
 FF ab  XF ab  TF b  DF ab  G  S [8]PPa = partial pressure of substance a (usually in Torr).
FFab = fragmentation factor, or fraction of total ion current from substance a having mass b(dimensionless; see Table 5-8 on page 5-28).

FFN28 = fragmentation factor for N2+ ions at 28 AMU from nitrogen (dimensionless; typicallyaround 0.9).

XFa = ionization probability of substance a relative to nitrogen; approximately the same as therelative ion gauge sensitivity as shown in (dimensionless).

TFb = transmission factor, the fraction of total ions at mass b which pass through the mass filter,
relative to ions with a mass of 28 AMU; nominally,
TFM = 28 / M (dimensionless).

DFab = detection factor for mass (b) ions from substance (a), relative to nitrogen at 28 AMU;
assumed to be 1.00 for Faraday detectors, but varies for EM detectors (dimensionless).

G = EM gain for nitrogen ions at 28 AMU (dimensionless; set equal to 1 for a Faraday Cup
detector).
S = sensitivity of instrument to nitrogen, the ion current at 28 AMU per unit of nitrogen partialpressure (usually in A/Torr).

Iab = ion current of mass peak (b) resulting from substance (a)In amps; assumes that there are no other substances present which contribute significantly tothe total current at mass peak (b).

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Transpector CPM Operating Manual

5.3.3 Additional Information For Interpreting Mass Spectra
5.3.3.1 Ion Source Characteristics
A closed ion source, and the particular inlet system selected, can have an effect on
the mass spectrum obtained.
The analyzer itself is a source of gas molecules because of outgassing from its
surfaces. Usually, outgassing levels can be reduced by baking the analyzer invacuum and by using the degas function (wherein the ion source surfaces arebombarded by high energy electrons). Overnight bakeouts at the maximum
allowable temperature is the best way to minimize the effects of outgassing of thesensor, manifold, and inlet system.
NOTE: It can take more than three hours for all parts of the sensor to reachmaximum temperature during a bakeout, and more than six hours to cool
down.

CAUTION
Make sure EM high voltage is off if the bakeout
temperature exceeds 150°C. Otherwise, permanent
damage to the EM may result.
It is possible that the opposite of outgassing can occur, that is, gas molecules canbe captured by the surfaces of the sensor. This effect is called pumping. The
magnitude of the signals of the gases pumped will be lower than is properly
representative of the composition of the gas in the vacuum chamber. Significant
temporary pumping effects will frequently occur following degassing the ion source.
Reactions involving gas molecules on surfaces of the analyzer can result in achange of composition. Gases can either be consumed by the surfaces, or
produced by the surfaces. One example of gas consumption is the reaction ofoxygen with a hot filament, particularly when tungsten filaments are used. The
typical result is an anomalously low concentration of oxygen detected.
See O’Hanlon’s book for more information on filament materials and theirinteractions with the gas being analyzed. (See Chapter 12, Bibliography.) An
example of gases being produced from surfaces is the liberation of carbon
monoxide molecules from a thorium oxide coated iridium filament by a sputtering
mechanism in the presence of significant quantities of argon. It is for this reason
that the PVD version of the CIS uses tungsten filaments.
There are cases where at least some of the ions detected are emitted fromsurfaces in the ion source under electron bombardment and are not generated in
the gas phase from neutral molecules. This process is known as electron
stimulated desorption (ESD), or sometimes as electron induced desorption (EID).
When the sensor has been exposed to fluorine containing substances (e.g., sulfur
hexafluoride, chlorofluorocarbons, perfluorotributylamine, or perfluorokerosene)

5 – 32

Transpector CPM Operating Manualfor extended periods of time, it is not uncommon for a strong F+ peak at 19 AMU toremain even after the fluorine containing substance has been removed. When
operating in the UHV region, ESD/EID of H+, C+, O+, and CO+ (and other ions) is
not uncommon. The clue to diagnosing this problem is that the observed
fragmentation patterns do not match known gas phase patterns. See pages fiveand six, and typical spectra TS2 through 5, 16, 28, and 30, of Partial Pressure
Analyzers and Analysis by Drinkwine and Lichtman for more information on
ESD/EID.
Partial pressure analyzers are also characterized by varying degrees of mass
discrimination, that is, the sensitivity of the instrument is a function of mass. Ion
sources show mass discrimination because various substances offer different
degrees of difficulty of ionization. Generally, heavy, large molecules are ionized
more readily than light, small molecules. There is a rough correlation between thenumber of electrons in a molecule and its ease of ionization. Although the total ionyield (that is, the sum of ions of all masses) is electron energy and ionizer
dependent, a reasonable estimate for the number of ions produced (relative to a
standard, usually nitrogen) in a partial pressure analyzer is the relative ionization
gauge sensitivity.
5.3.3.2 Scanning Characteristics
Quadrupole mass filters can also exhibit mass discrimination characteristics
depending on how the control voltages are varied during the sweep through themass range. Most instruments are designed to operate with a constant peak width(constant M) which results in a resolution which is proportional to the mass. This
characteristic provides a good degree of peak separation throughout the mass
spectrum, but results in an ion transmission efficiency (i.e., the fraction of all ionsof the selected mass entering the mass filter which are transmitted through it)
which decreases as mass increases.
The way the mass scale is calibrated (tuned)—the way the peak positions andwidths are adjusted—can have a significant effect on the transmission efficiency ofthe mass filter across the mass spectrum. If the adjustments are not made properly,
the ratios of peak heights across the mass range will not be correct.

5 – 33

Transpector CPM Operating Manual

5.3.3.3 Fragmentation Factors
The fragmentation factor is the fraction of the total ion current contributed by ionsof the chosen mass. Only peaks contributing at least one percent to the total ion
current are included in the list. The sum of the factors for all the peaks in a mass
spectrum cannot exceed 1.00. The sum can be less than 1.00 if only some of thepeaks are listed (either there are many peaks, or some of the ions produced lie
outside the mass range of the particular instrument used).
The data presented in Table 5-8 on page 5-28 are typical fragmentation factors forsome common gases at an electron energy of 70 eV. These fragmentation factors
can vary considerably with electron energy. For instance, at 35 eV the only
significant peak in argon is Ar+ at 40 AMU.

5 – 34

Transpector CPM Operating Manual

Chapter 6
Operation
6.1 HexBlock
The HexBlock provides several inlets, a process pressure gauge (CDG) and acalibration reference. It allows for up to three pressure ranges, including a highconductance inlet that covers various applications such as High Density Plasma
Etch (HDP), TiN Deposition such as TDMAT, W CVD, or any other semiconductor
process. Advantages include:

small vacuum path lengths

minimum surface areainterchangeable orifices

multiple process connection options (CF40, KF40 and KF25)



multiple sniffer (capillary) inlet options for sampling the process

The orifices mounted in the HexBlock valves are replaceable.
Pressure ranges for the two main sampling valves are:V1 . . . 3 mTorr–10 Torr
V2 . . . 3 mTorr–Atmosphere

CAUTION
The tool and the CPM must be vented before changing
orifices, except when a tool isolation valve is installed.

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Transpector CPM Operating Manual

6.1.1 HexBlock Inlet


V1—Low pressure sampling (LP). Indicates background pressures for someetch or CVD process. (No bypass available.)

V2—High pressure sampling (HP). Indicates process pressures for etch, CVD
and 300 mm degas sampling. Bypass is optional.



V3—High Conductance. Similar to a wide open position. Used for any highvacuum condition lower than 1 mTorr.



V4—Bypass. Used in conjunction with V2 in high pressure applications (above
1 Torr). V4 connects to the interstage of the Turbo Molecular Pump via a bypass
tube which pulls gas from the process directly to V2. This can cut the responsetime down from several minutes to less than ten seconds for a 100 Torr process.
The V4 bypass inlet typically consumes approximately 17 sccms of process gas.
NOTE: When sampling lighter gases such as hydrogen and helium, it may benecessary to connect the V4 bypass tube to the foreline pump port rather
than the turbo pump interstage port to improve pumping efficiency.

CAUTIONTo prevent pressure bursts to the RGA, V4 should open
before V2 to ensure the pressure is correct for the V2
orifice. When V2 is closed, V4 should remain open forseveral seconds to pump out residuals left from sampling
the process.


V5—Calibration Reference. Used for mass tuning and as a sensitivity
reference, providing:a means to tune the RGA

a reference for adjusting the EM voltage



a way to check whether the orifices are getting dirty or cloggeda reference for tracking the performance of the RGA

The Calibration Valve refers to the option of adding a Calibration Reference to
the CPM system. The Calibration Reference is located near the ion source.
NOTE: The Transpector emission and EM are turned off prior to opening
Calibration Valve (V5). This is due to trapped gas in the calibrationreference.

6–2



Sniffer or Capillary—The sniffer or capillary option allows sampling closer tothe actual process reactions and it gives a faster response time and better
signal (uses valve V2). Capillaries also provide part of the necessary pressure
drop to sample from atmospheric pressure.



CDG Gauge—The CDG gauge measures process pressure. It helps toprevent accidental or erroneous inlet valves from being opened.

Transpector CPM Operating Manual

6.1.1.1 Hex Block Process Connections
Table 6-1 Hex block process connections

Types of connections

Part Number

KF25 In-line connection

923-700-G1

KF40 In-line connection

923-701-G1

CF40 In-line connection

923-702-G1

KF25 90 degree elbow connection

923-703-G1

KF40 90 degree elbow connection

923-704-G1

CF40 90 degree elbow connection

923-705-G1

6.1.2 Calibration Option
A single source of gas mixture will accomplish two calibration functions:

Mass scale calibration

Partial pressure reference levels

NOTE: Selection of the appropriate gas mixture components is dictated by themass range desired.
Test Mix 1 composition is listed in Table 6-2. The method of delivery is a flow
reference with a remote on/off valve (V5). The gas flow rate is calibrated at thefactory and is kept small (typically 1x10-4 Torr-L/s) by a sintered leak. Flow throughthe leak element is viscous, therefore the gas composition in the reservoir is notaltered by sampling. The pumping system does not allow other valves to be opened
with the calibration reference to ensure that no calibration mix enters the tool.
Table 6-2 Mix 1: Calibration mixture of selected impurities in argon

Mix 1

Component(Composition)

Calibration Masses

H2 (1%)

2

He (1%)

4

N2 (1%)

28

Ar (Balance)

36, 38, 40

Kr (1%)

84

Xe (1%)

134, 136

NOTE: Refer to the software operating manual for more information regarding
Mass Tuning. Results using FabGuard Explorer or FabGuard with thiscalibration mixture may be different than shown above due to theprogramming of the ionization probability and material factors.

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Transpector CPM Operating Manual

6.1.2.1 High Mass FC5311 Tuning Reference
The FC5311 Tuning Reference Gas option is available for adjusting peak position
for 300 AMU CPMs. It is controlled via a manual valve. FC5311 Tuning Reference
Gas is a volatile liquid. It is located at the inlet of the high vacuum pump.

CAUTION
A bakeout must be performed if FC5311 Tuning
Reference Gas is sampled. Up to 24 hours of pumping
may be required to remove all trace levels.
The perfluorophenanthrene liquid in the FC5311 Tuning Reference has a highmolecular weight and a vapor pressure of 100 Pa (1 Torr) at 22°C (71.6°F). The
mass spectrum is given as mass and characteristic peak intensity in Table 6-3. The
masses of abundant peaks can be used with the Tune option of FabGuard Explorer
to calibrate the mass scale, particularly for 200 AMU and 300 AMU sensors.
Table 6-3 Mix 2: FC5311 reference mass spectrum
70 eV, peak intensity ranging 1–100%

6–4

Mass

Intensity

Mass

Intensity

55

1.83

219

2.66

56

1.09

231

4.06

57

2.97

243

7.66

69

100

255

2.09

70

1.17

267

2.55

93

5.97

286

2.09

94

1.27

293

7.65

100

11.09

305

1.14

112

1.50

317

2.27

119

16.80

331

1.12

124

1.49

343

1.17

131

47.08

367

1.88

143

5.26

405

4.23

155

3.05

455

18.30

162

5.64

505

4.41

169

7.66

517

1.17

181

11.23

555

4.62

Transpector CPM Operating Manual

Table 6-3 Mix 2: FC5311 reference mass spectrum
70 eV, peak intensity ranging 1–100%

Mass

Intensity

Mass

Intensity

193

6.73

605

1.64

205

2.82

624

1.00

217

2.05

6.1.3 Process Gauge (CDG)
The Capacitance Diaphragm Gauge (CDG) measures the pressure based on theelastic deformation of a ceramic diaphragm. The capacitance change caused by
the deflection is converted into a linear output signal proportional to pressure. The
CDG is resistant to high pressure surges.
The CDG type is selected based on process conditions. (See Table 6-4.) Select agauge based on maximum pressure orifice. The CDG range must be equal to or
the next higher range than the highest pressure orifice (typically V2 or the sniffer).
Table 6-4 Hex block process pressure gauge

Process Range

Part Number

1 Torr range

964-208-G11

10 Torr range

964-208-G12

100 Torr range

964-208-G131000 Torr range

964-208-G14

6.2 Heaters
A Transpector CPM software interlock will turn on the heater only when the Turbo
Molecular Pump is at normal speed (72,000 RPM). There are two temperature
settings: low (90°C); high (150°C).
l

6.3 Pumping System
The pumping system is preconfigured at the factory. The pumping system can bereconfigured with a different:Foreline Pump, either System Controlled or customer supplied

Turbo Molecular Pump, either standard or corrosiveInlet arrangement, the type of inlet and/or orificesCalibration reference

6–5

Transpector CPM Operating Manual

6.3.1 Foreline Pump
The system controlled Foreline Pump configuration is selected when there is a
INFICON supplied Foreline Pump. If a customer supplied foreline pump is used toback other vacuum equipment, a check valve can be used to temporarily isolate
the CPM from any short (<10 seconds) pressure bursts that would damage theCPM. See Table 9-3 for the check valve part number.

CAUTION
A customer supplied pump must supply a continuous
foreline pressure between 10-2 and 10 Torr.
6.3.1.1 Foreline Pirani Gauge
A Pirani gauge mounted to the CPM foreline block monitors the pressure in theforeline. In the event of a pumping system malfunction, the foreline Pirani gauge
can be used to verify the foreline pressure is <10 Torr. For optimal pumping system
performance, the foreline pressure should be <2.25 Torr.

6.3.2 Turbo Molecular Pump
There are two types of pumping systems: Standard (non-corrosive) and corrosive.
The standard Turbo Molecular Pump is used in both applications.
The corrosive pump configuration is selected for applications such as CVD or Etchor whenever corrosive gases are being sampled. The purge valve is automatically
opened when the CPM Turbo Molecular Pump is operating.
The corrosive service high vacuum pump requires 10 to 25 sccm of purge gas flow
through the bearing region to protect the bearings from corrosion and loss ofbearing lubricant by evaporation. The regulator is preset at the factory using a MFC
to produce 10 sccm of nitrogen purge. To produce 10 sccm, the nitrogen regulator
should be set between 10 and 15 psi (gauge).

CAUTION
For the corrosive service Turbo Molecular Pump
(CVD/Etch), nitrogen purge gas is required whenever thesystem is operational.

WARNING - Risk Of Electric ShockThe Turbo Molecular Pump must be completely at rest
and the controller power supply must be disconnected
before removing the Turbo Molecular Pump connecting
cable.

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Transpector CPM Operating Manual

6.3.2.1 Turbo Molecular Pump Status
Pump rotational speed is the RPM at which the Turbo Molecular Pump is operating.
Normal speed is 80% of full speed (72,000 RPM). Full speed is 90,000 RPM.

CAUTION
With the corrosive Turbo Molecular Pumping system, thenitrogen purge valve with regulator is connected to thepurge port of the pump. The nitrogen purge valve isalways open when the corrosive Turbo Molecular Pump
is running. This protects the bearings from corrosive gas
attack and evaporation of bearing lubricant.

6.4 Nitrogen Purge Valve for the Turbo Molecular Pump on
Corrosive Pumping Systems
On corrosive pumping systems, the nitrogen purge valve provides a continuous
flow of dry nitrogen to the bearings of the Turbo Molecular Pump.
The nitrogen purge valve opens when the Turbo Molecular Pump is turned on, andcloses when the pump is shut down. Over-pressurization is avoided by pressure
relief of the Foreline Pump valves. Over-pressure exits the exhaust. There is nosoftware control of the nitrogen purge valve; it is coupled with Foreline Pump
operation.

6.5 Filament Control
6.5.1 Interlock
On pump down, emission will automatically turn on when the Turbo Molecular
Pump reaches full speed (90,000 RPM). The emission will automatically turn off if
the pump speed is below 72,000 RPM.

6.5.2 Total Pressure Calibration
To protect the filament, Transpector CPM has a factory-calibrated total pressure
lens that measures the total pressure in the closed ion source. The filament will turnoff (within 50 ms) after the pressure in the ion source rises above the total pressure
setpoint, typically 1E-3 Torr @ 40 eV 200 A for a CVD closed ion source.
The total pressure reading is calibrated with the ionizer set to the default low
emission settings (200 A emission; 40 eV electron energy). The default value forthe over-pressure setpoint is 1 to 3 mTorr.

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Transpector CPM Operating Manual

When operating at high emission (2 mA at 70 eV), the pressure will readapproximately 20 times high. Therefore, the over-pressure will trip at a pressure
about 20 times lower. Typically, this is not an issue since high emission should only
be used when high sensitivity is needed, such as when leak checking a system.
When sampling at a process pressures, running at high emission will result in poor
linearity if the over-pressure does not trip. If 70 eV is desired for monitoring processgas, run FabGuard Explorer, enter Sensor Configuration and change the electronenergy to 70 eV, leaving the emission current at 200 A.
Re-calibration requires calculation of the pressure in the CIS when Process Gas is
introduced at a known pressure. The relationship is:

PCIS = COrifice PProcess / CCIS

[1]

Table 6-5 lists the values for the exit conductance for CIS and for different orifices
used in CPM sampling systems. Equation [1] can be used to infer the target gas
pressure in the CIS that produces the total pressure measurement. Using theprocess gas pressure (measured by the CDG or other gauge) and the conductanceof the orifice in use, the PCIS (Hi-P) and PCIS (Lo-P) values can be calculated to use
the automatic TW-32 Total Pressure Calibration software.
Table 6-5 CIS and Orifice Conductances for use with Equation 1

PCIS (Torr)
Orifice Designation

Orifice Diameter(microns)

Conductance (L/s)

CVD – CIS Exit-------

1.0

10 mT

750

3.9E-2

3.9E-4

100 mT200

2.8E-3

2.8E-4

1 Torr62

2.7E-4

2.7E-43 Torr35

8.6E-5

2.6E-46 Torr25

4.4E-5

2.6E-410 Torr20

2.8E-5

2.8E-4[@ Design
PProcess]

6.5.3 Filament Lifetime
Tungsten filament material is used in corrosive applications. The melting point oftungsten is 3410°C; its boiling point is 5660°C. At normal operating temperatures(approximately 2200°C), tungsten vapor pressure is approximately 1E-7 Torr,
which normally results in a reasonable lifetime. Various oxides of tungsten are
known.
The lowest oxide, WO2, is brown in color and has a sublimation temperature ofaround 800°C. The intermediate oxides, W2O5 and W4O11, which are blue-violet
in color, and sublimes between 800°C and 900°C.

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Transpector CPM Operating Manual

The highest oxide, WO3 is yellow in color and has a melting point of 1473°C. No
boiling point or sublimation temperature is reported, but presumably it is far morevolatile than the pure metal itself.
At normal filament operating temperature, tungsten will readily react with oxygenor water vapor to form oxides.


If the oxygen (or water vapor) is very high, WO3 is formed. This would beobserved if an attempt had been made to turn on the filament in air at 760 Torr.

At lower oxygen (or water vapor) partial pressures, lower tungsten oxides areformed, giving rise to the blue color observed on the electron repeller. Since thetungsten oxides are far more volatile than the pure tungsten, when they formon the filament surface, they evaporate away, depositing on the nearest
relatively cool surface.

Figure 6-1 depicts a graph correlating tungsten filament mean time between failure(MTBF) in seconds with oxygen or water vapor partial pressure in Torr. The graphpredicts a filament lifetime of approximately 200 seconds at 1 Torr, the maximum
pressure at which Transpector can maintain electron emission.
Figure 6-1 Tungsten Filament MTBF

Tungsten Filament MTBF
1.E+08

1 year

1.E+07

1 monthMTBF (seconds)

1.E+06
1 day

1.E+05
1.E+04

1 hour

1.E+03
1.E+02

1 minute
1.E+01y = 144.92x -0.9306
R 2 = 0.9895

1.E+00
1.E-01
1.E-07

1.E-06

1.E-05

1.E-04

1.E-03

1.E-02

1.E-01

1.E+00

1.E+01

1.E+02

1.E+03O 2 or H 2O Partial Pressure at the Filament (Torr)

At 1 Torr at the filament, the pressure inside the anode cylinder will beapproximately five times higher (assuming the bulk of the gas load is entering the
CPM manifold through the closed ion source).
At 5 Torr, the collisional mean-free-path for ions will be less than 0.01 mm. The
distance from the ion creation region to the total pressure collector electrode isabout 4 mm, or approximately 400 mean-free-paths away. At this pressure, thescattering losses may sufficiently reduce the total pressure ion current so that itremains less than the over-pressure trip current. Under these conditions, the

6–9

Transpector CPM Operating Manual

filament would stay on and react with the oxygen, producing relatively volatile
tungsten oxides, until the filament diameter had been reduced to the point where
the tension on the wire was sufficient to cause the wire to pull apart.
Figure 6-2 depicts a CPM over-pressure trip calculation. The total pressure current
curve after 5E-1 is due to the pure collisional scattering. Without collisional
scattering, it would be linear. The point where the CIS total pressure current and
DAC line meet is called the over-pressure trip point. When the total pressure
current exceeds the DAC line (Region II) the filament is turned off.
NOTE: In Region II, there is a six second delay in turning emission on and off.
At 5 Torr in Region III, there is no overpressure and no emission error, but thefilament would last only hours. At 100 Torr, the filament would be destroyed
instantly.
Figure 6-2 CPM over-pressure trip calculations

CPM Over-pressure Trip Calculations
1.E-01

1.E+09

1.E-02

Ion Current (Amps)

filament will turnoff in this region

Region I

Region II

1.E-04
1.E-05

1.E+08

Region III

1.E+05

1.E-06
1.E-07

1.E+07
1.E+06

1.E+04
1.E+03

CIS total pressure current

1.E-081.E+02

Filament Lifetime(s)1.E-09

1.E+01

1.E-10

1.E+001.E-11
1.E-07

1.E-06

1.E-05

1.E-04

1.E-03

1.E-02

1.E-01Ion Source Total Pressure (Torr)
Collected

6 – 10filament
will stayon and be
destroyed

Filament Lifetime in O2/H2O (s)1.E-03filament will stay
on in this region

DAC = 150

Lifetime (s)1.E+00

1.E+01

1.E-01
1.E+02

Transpector CPM Operating Manual

6.6 Pneumatic Digital Pressure Switch and Pressure Gauge
The Pneumatic Digital Pressure Switch and Pressure Gauge:

provide a visual display of the air (or nitrogen) pressure provided to thepneumatic block

ensure proper pressure for the CPM to function. If the pressure has decreased
below 58 psi (3.999 bar) [399.9 kPa] or exceeds 100 psi (6.895 bar)[689.5 kPa], the CPM system will shut itself down

Figure 6-3 Location of pneumatic digital pressure switch and gauge

Pneumatic Digital
Pressure Switch
and Gauge

6.6.1 Setup Procedure
This setup procedure assumes:

no pressure is applied

psi is the pressure unit

Figure 6-4 depicts the location of the display and controls.

6 – 11

Transpector CPM Operating Manual

Figure 6-4 Location of display and controls

Pressure Unit Setup

1 Press and holdfor 5 seconds. The display will show LoC (locked

condition).

2 Press

to display UnL (unlock).

3 Press. The CPM will return to Measure Mode.

4 Press and holdfor 2 seconds. The display will show the current Pressure
Unit. The default is psi.

5 Change to the desired Pressure Unit by pressingor.

Display Color

6 Press. The display will show the Display Color Mode.
The default is Sor (Red/on).

7 To change the Display Color Mode, pressor.

Operating Mode

8 Press. The display will show the current operating mode. The default isund.

9 To change the Window Mode, pressorto select und (Window Mode).

Output Mode

10 Press. The display will show the current Output Mode. The default is nC(normally closed).

11 Pressorto change the Output Mode.

NOTE: The no (normally open) mode is not available.

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Transpector CPM Operating Manual

Response Time Mode

12 Press. The display will show the current Response Time. The default is
20, at which the display color will change to red.

13 Change the setting by pressing
14 Pressor.

to return to Measure Mode.

Upper And Lower Pressure Limits

15 Press. The current lower limit is displayed. The display will alternately
flash n_1 and a number representing the lower pressure limit.

16 Pressto change the lower limit to 58 psi.

16a The least significant digit will flash and can be changed using
16b Pressor.

to set the digit to the desired number.

16c The next digit will flash.
16d Change the digit using eitheror, then press.

16e Continue this process until 58.0 is achieved.
16f Press. The display will flash 58.0 with a vertical bar showing to theleft of the 58.0.

17 Press. The current upper limit is displayed. The display will alternately
flash between n_2 and some number representing the upper pressure limit.
Follow the same procedure (refer to step 16) to set the upper limit to 100 psi.

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Transpector CPM Operating Manual

6.6.2 How to Test for Proper Settings
With zero pressure applied, the display will show 0 pressure (small negative
numbers are acceptable) and the display will be colored red.
NOTE: The following test assumes the pressure unit is psi.
Apply a pressure of slightly greater than 58 psi and the display color should
illuminate in green. Increase the pressure slightly greater than 100 psi and thedisplay color should illuminate in red. Set pressure to a nominal 80 psi operating
condition and the display color should illuminate green.
In normal operating conditions, the display is red when the pressure is below 58 psi
or above 100 psi.
Interlocks ensure that the system will not be damaged by an air pressure failure
and the CPM will shut itself safely down after ten seconds.

6.6.3 How to Lock and Unlock the Settings
To lock the settings to protect them from accidental change.

1 In Measurement Mode, press

for five seconds. UnL (unlocked) is

displayed.

2 Pressor

3 Press

to return to Measurement Mode.

to change UnL to LoC.

To unlock the settings so that they can be changed:

1 In the Measurement Mode press

for five seconds. LoC (locked) will

display.

6 – 14

2 Pressor

3 Press

to return to Measurement Mode.

to change LoC to UnL.

Transpector CPM Operating Manual

Chapter 7
Maintenance
7.1 Introduction
The sensor, Turbo Molecular Pump, Foreline Pump, and HexBlock are subject toaging and will eventually require repair or replacement.
NOTE: The Transpector electronics module and CPM controller modules rarely
require repair or maintenance.
INFICON provides complete service for both sensors and electronics modules.
(Refer to section 1.4, How to Contact INFICON, on page 1-4.)

7.2 Safety Considerations
WARNING
If Transpector CPM is used in a manner not specified by
the manufacturer, the protection provided byTranspector CPM may be impaired.

WARNING
Transpector CPM maintenance should only be performedby qualified personnel.

WARNING
There are no user serviceable parts inside theTranspector electronics or the CPM controller modules.

WARNING - Risk Of Electric ShockBefore any maintenance is performed, Transpector CPM
must be disconnected or isolated from its power source(AC mains) and the Turbo Molecular Pump must be at
rest.

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Transpector CPM Operating Manual

7.2.1 Toxic Material
WARNING
Sensors, pumps, Hexblock components and connecting
tubing used in applications where toxic materials are
employed or generated are likely to carry residues ofthese materials. Appropriate safety precautions must beobeyed when handling contaminated sensors to assure
safety of maintenance personnel.

7.2.2 Radiation
Transpector CPM does not produce harmful radiation.

7.2.3 Electrical Voltages
The Transpector CPM does not present electrical hazards when enclosed andgrounded according to the specifications given in the installation instructions.

WARNING - Risk Of Electric ShockThe Transpector electronics and CPM controller modules
should never be operated with their covers removed.
Hazardous electrical voltages present a shock hazard.
Such operation should not be attempted, except byqualified service personnel.

WARNING - Risk Of Electric ShockBefore any maintenance is performed, the CPM system
must be disconnected or isolated from its power source(AC mains) and the Turbo Molecular Pump must be at
rest.

7–2

Transpector CPM Operating Manual

7.3 Maintenance Procedures
7.3.1 Bakeout of Quadrupole
If the CPM Symptom—Cause—Remedy Chart on page 8-2 suggest that thesensor is contaminated, try first to restore normal performance by baking thesensor under a high vacuum — at least 1 x 10-5 Torr (1.333 x 10-5 mbar)[1.333 x 10-3 Pa] — for several hours, preferably overnight. Table 7-1 represents
the maximum bakeout temperatures.
If baking the sensor doesn’t increase sensor performance, do section 7.7.2,
Transpector Sensor Filament Replacement, on page 7-18 and do section 7.7.3,
Transpector Sensor Ion Source Replacement, on page 7-20.
If the problem remains, contact INFICON. (Refer to section 1.4, How to Contact
INFICON, on page 1-4.)
Table 7-1 Maximum bakeout temperatures

Faraday Cup Sensors
Electron Multiplier
Faraday Cup
Combination

EM ModeFC ModeWhile
OperatingWith
Electronics
Removed

200C

300C

150C
200C

300C
300C

CAUTION
When heating the sensor above 200C, the electronics
module and the signal contact must be removed from thesensor.

7.3.2 Spare Heating Jacket
INFICON offers several heating jackets to help in baking a sensor. These heating
jackets operate at a maximum temperature of 150C. (Refer to section 1.4 on page
1-4.)

7–3

Transpector CPM Operating Manual

7.4 General Instructions For All Repair Procedures
CAUTION
Do servicing in a clean, well illuminated area.

WARNING
Obey all cautions and warnings.

CAUTION
Wear clean nylon, lint free lab gloves or finger cots. Do
not touch the vacuum side of any component with
unprotected fingers.

CAUTIONUse clean tools for sensor disassembly and assembly.

7–4

Transpector CPM Operating Manual

7.5 Required Tools, Materials, or Parts
7.5.1 Tools for Replacing the Filament Kit


3 mm nut driver

1/16 in. flat blade screwdriver

7.5.2 Tools for Replacing the Ion Source

1/16 in. flat blade screwdriver#2 Phillips head screwdriverPrecision pliers

7.5.3 Tools for Replacing the Electron Multiplier

1/16 in. flat blade screwdriverPhillips head screwdriver

1.5 x 50 mm hex driver

2.0 x 75 mm hex driverPrecision pliers

Non-Metallic tweezers

7.5.4 Parts Required For Maintenancefilament kit



ion source kit

diaphragm kit

replacement valvesorifice gaskets



VCR gaskets

copper gaskets

7–5

Transpector CPM Operating Manual

7.6 Changing Diaphragms in the Foreline Pump
7.6.1 Replacement Interval
The foreline pump diaphragm disks, valve seals, valve disks, and O-rings must be
replaced every 8000 hours of operation.

7.6.2 Diaphragm kit PN 923-418-G1
Figure 7-1 Diaphragm kit contentsThin
O-ringThick
O-ring

7–6

Valve
Disk

Valve
Seal

Diaphragm DiskThin
O-ringThick
O-ring

Valve
Disk

Valve
Seal

Diaphragm Disk

Transpector CPM Operating Manual

7.6.3 Procedure
CAUTION
Wear safety glasses and latex gloves during thisprocedure.

1 Using two 9/16 in. open-end wrenches, remove the interstage tubing between
the two pump heads. (See Figure 7-2.)
Figure 7-2 Removing the interstage tubing

Interstage
Tubing2 Using a #1 Phillips screw driver, remove the cam cover from the top side of theforeline pump. (See Figure 7-3.)
Figure 7-3 Removing the cam cover

Cam Cover

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Transpector CPM Operating Manual

3 Inspect the inside of the pump for cleanliness. A buildup of a black, powdery
substance indicates bearing wear requiring pump replacement.

4 The diaphragm disks are screwed into the cams. (See Figure 7-4.)
Figure 7-4 Foreline pump cams

Cams

Diaphragm
Disk
Spacers

5 Unscrew the head covers of the foreline pump using a 3 mm hex key. (SeeFigure 7-5.)
Figure 7-5 Removing the head cover

Head
Cover

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Transpector CPM Operating Manual

6 Remove the foreline pump head cover and diaphragm plate. (See Figure 7-6.)
Figure 7-6 Diaphragm and diaphragm plate

DiaphragmThin
O-ringHead
Cover

Diaphragm
Plate

7–9

Transpector CPM Operating Manual

7 Separate the diaphragm plate from the head cover. (See Figure 7-7.)
NOTE: Take note of the orientation of the valves in the head cover anddiaphragm plate. They must be reassembled in exactly the sameorientation.
Figure 7-7 Diaphragm plate separated from head cover
Valve
Seal

Thick
O-ring

Valve
Disk

Head
Cover

7 – 10Diaphragm
PlateTranspector CPM Operating Manual

8 Remove the old valve disks, valve seals and O-rings from both sides of thediaphragm plate. (See Figure 7-8.)
Figure 7-8 Removed valve seals, valve disks, and O-rings

Diaphragm Plate(Valve Side)

Diaphragm Plate(Diaphragm Side)7 – 11

Transpector CPM Operating Manual

9 Clean both sides of the diaphragm plate and the foreline pump head cover withmethanol and lint free wipes. Pay special attention to the sealing surfaces(grooves) inside of the head cover and on either side of the diaphragm plate.

CAUTION
Read and understand the entire Methanol Material Safety
Data Sheet. Follow the precautions specified in the
MSDS.

10 Rotate the diaphragm disk counterclockwise to unscrew the diaphragm disk
from the cam. If necessary, carefully use a flat head screwdriver to pry up thediaphragm disk. (See Figure 7-9.)
Figure 7-9 Unscrew diaphragm disk

RotateCounterclockwise

7 – 12

Transpector CPM Operating Manual

11 There are spacers between the diaphragm disks and the cam. Note the positionof the spacers when removing the diaphragm disks. The spacers must be
reassembled on the new diaphragm disks in exactly the same position. (SeeFigure 7-10.)
Figure 7-10 Spacers

Spacers

Spacers

12 Place the original spacers on the new replacement diaphragm in exactly thesame order as they were on the old diaphragm. (See Figure 7-11.)

CAUTION
The spacers, cam, diaphragm disks and electric motor
are balanced at the manufacturer for optimal
performance. Therefore, one side of the diaphragm may
have a different number of spacers than the other in orderto achieve balance. To maintain the balance, the original
spacers must be transferred to the new diaphragm inexactly the same position as they were when removed
from the old diaphragm.

7 – 13

Transpector CPM Operating Manual

Figure 7-11 Placing original spacers on new diaphragm

13 Clean the channel that the diaphragm disk is seated in with methanol and lint
free wipes. (See Figure 7-12.)

14 Screw the diaphragm disk, with original spacers, into the cam screw hole. (SeeFigure 7-12.)

CAUTION
Screw in the diaphragm disk tightly.
A loose disk can damage the pump.

7 – 14

Transpector CPM Operating Manual

Figure 7-12 Installing the new diaphragm disk

Clean
ChannelCam Screw
Hole
Diaphragm Disk
with Spacers

15 Place the thin O-ring into the groove on the diaphragm side of the diaphragmplate. (See Figure 7-13.)
Figure 7-13 Thin O-ringThin
O-ring

16 Carefully place the diaphragm plate over the diaphragm head so that the screw
holes line up. (See Figure 7-14.)

7 – 15

Transpector CPM Operating Manual

17 Install the new valve disks, valve seals and thick O-ring onto the diaphragmplate.

18 Install the head cover on the diaphragm plate.
Figure 7-14 Assembling valve disks, valve seals and thick O-ring

Diaphragm
Plate

Head
Cover

19 Replace four hex screws to secure the head cover.
20 Perform steps 5-19 again for second pump head.
21 Replace the cam cover.
22 Replace the interstage tubing. (See Figure 7-15.)
Figure 7-15 Reassembled interstage tubing
Interstage
Tubing

7.7 Transpector Sensor MaintenanceSensors must be cleaned only by qualified factory personnel. Refer to section 1.4,
How to Contact INFICON, on page 1-4 for assistance.
Maintenance of the Transpector CPM sensor is limited to filament, ion source andelectron multiplier replacement.

7 – 16

Transpector CPM Operating Manual

7.7.1 How to Determine if a Filament Kit Replacement is Required
Do these steps to determine if a filament replacement is required.

1 Measure the resistance of the filament while the sensor is under vacuum bymeasuring the resistance between pins 3 and 10. (See Figure 7-16). A failed
filament will measure open while an intact filament will measure 0.8 Figure 7-16 Sensor pinout

6

8

7

5

1

4
3

9
10
11
12

2

13

Table 7-2 Pin assignment

Pin

Assignment

Pin

Assignment

1

PP

8

GND

2

EM HV

9

RF+

3

Filament

10

Filament

4

Reserved

11

Reserved

5

Anode

12

Focus

6

RF-

13

TP

7

GND

NOTE: Although the following measurements may measure below 30 M with thefilament assembly and ceramic shield in place, they must be above 30 M
when measured with the filament assembly and ceramic shield removed.

7 – 17

Transpector CPM Operating Manual

2 Measure the resistance of each of the pins with respect to ground(pin 7 and 8). These measurements must be above 30 M.

3 Measure the resistance of each of the pins with respect to each other. All ofthese measurements must be above 30 M, with the exception of themeasurement between the filament pins if the filament has not failed.

7.7.2 Transpector Sensor Filament Replacement
1 Remove the ceramic sealing disk (A) by carefully pulling the wire hold downs(B) away from the edges of the disk and pulling off the sealing disk.

2 Remove spring (C).
3 Remove the filament lead screw (D1), loosen the filament lead screw (D2) andremove the filament leads (E) from the filament. (See Figure 7-17.)
Figure 7-17 Sensor headBA

7 – 18

C

D1 D2

E

Transpector CPM Operating Manual

4 Remove three nuts (F) and the washers holding the filament assembly in place.
Be careful; do not to lose the two ceramic sealing disk wire hold downs. (SeeFigure 7-18.)
Figure 7-18 Removing sensor filament assemblyF

5 Carefully remove the filament assembly. (See Figure 7-19.)
Figure 7-19 Filament assembly removed

7 – 19Transpector CPM Operating Manual

6 Remove the three screws holding the filament assembly on the shipping fixture.
7 Carefully remove the new filament from its fixture and place it on
the ion source posts.

8 Replace the three filament assembly nuts and washers. Be sure to install thewire hold downs.

CAUTION
To avoid cracking the ceramic plate, do not overtighten
the three nuts.

9 Reattach the filament leads and tighten the filament lead screws.
10 Reinstall spring and ceramic sealing disk.

7.7.3 Transpector Sensor Ion Source Replacement
1 Remove filament lead screw (A1), loosen filament lead screw (A2), and loosen
the three screws (B) in the ion source lead connectors. (See Figure 7-20.)
Figure 7-20 Filament lead screws (A1, A2) and ion source lead connectors (B)A1

B

7 – 20A2

Transpector CPM Operating Manual

2 Pull the electrical leads away from the sensor.
3 Remove the three ion source retaining screws (C) around the bottom of the ion
source assembly. (See Figure 7-21; one screw is not visible in the figure). They
hold the ion source onto the quadrupole assembly.
Figure 7-21 Ion source retaining screwsC

7 – 21

Transpector CPM Operating Manual

4 The ion source can now be removed by lifting it off the quadrupole assembly.
Install a new ion source by reversing the above steps. (See Figure 7-22.)
Figure 7-22 Ion Source and quadrupole assembly

5 Using an ohm meter, check that the filament is not shorted to ground or to anyof the ion source plates and that the two filament leads show a filament
resistance of approximately 1 at the feed-through (approximately 0.5  at thelead connectors).

7 – 22

Transpector CPM Operating Manual

7.7.4 Electron Multiplier Replacement
NOTE: Refer to section 7.5.3, Tools for Replacing the Electron Multiplier, on page
7-5 before continuing.

1 Remove filament lead screw (A1), loosen filament lead screw (A2), and loosen
the three screws (B) in the ion source lead connectors. Using the 1.5 x 50 mm
hex driver, unscrew the screws (C) that secure the two RF leads. Make sure to
remove the lock washers as well. There are a total of seven leads that must to
be loosened. (See Figure 7-23.)
Figure 7-23 Detach leads

C

A1
A2

B

2 Gently pull the electrical leads away from the sensor.
CAUTION
Do not bend the leads.

7 – 23

Transpector CPM Operating Manual

3 Using the 2.0 x 75 mm hex driver, unscrew three screws (D; one is hidden in
the figure) holding the sensor assembly to the feedthrough. Gently remove thesensor assembly from the feedthrough. (See Figure 7-24.)
Figure 7-24 Removing the sensor assemblyD

7 – 24

Transpector CPM Operating Manual

4 Using the Phillips head screwdriver, remove three gold screws (E; one ishidden in the figure) holding the EM assembly inside of the sensor assembly.
(See Figure 7-25)
Figure 7-25 Removing the screws holding the EM

E

7 – 25

Transpector CPM Operating Manual

5 Gripping the bottom of the EM assembly, gently remove the EM assembly fromthe sensor assembly. (See Figure 7-26.)
Figure 7-26 EM assembly

7 – 26

Transpector CPM Operating Manual

6 Remove the ceramic shield on the bottom of the old detector assembly. (SeeFigure 7-27.)
Figure 7-27 Removing the ceramic shield

Ceramic Shield

7 – 27

Transpector CPM Operating Manual

7 Install the ceramic shield removed in step 6 onto the new Electron Multiplierassembly.

8 Install the new Electron Multiplier assembly into the sensor can.
9 When installing the sensor back into the feedthrough, ensure that the two pinson the bottom of the detector align with the two pins on the feedthrough. (SeeFigure 7-28.)
Figure 7-28 Pin location
Detector Pins

10 Reverse steps 1-4 to reassemble the Transpector CPM sensor.

7 – 28Transpector CPM Operating Manual

7.8 HexBlock Inlet Maintenance7.8.1 Valve and Orifice Replacement
Under clean operating conditions, the HexBlock valves can operate 1,500,000
cycles before requiring maintenance. Depending on the application and the gases
processed, valve and/or orifice replacement may be necessary.

1 Remove valve cover by loosening two screws (A) with 2.5 mm allen wrench.
(See Figure 7-29.)
Figure 7-29 Removal/installation of valve coverA

2 Loosen four silver plated screws (B). (See Figure 7-30.)
Figure 7-30 Removal/installation of four silver plated screws

B

3 Remove the valve.
4 Carefully remove the old C-ring (for HexBlock) or viton O-ring (for foreline
block). (See Figure 7-31.)

7 – 29Transpector CPM Operating Manual

CAUTION
Do not scratch the seal surface. The seal surface can beeasily damaged by a metal tweezer. Use a nonmetallic
tweezer.
Figure 7-31 Removal/installation of C-ring

5 Carefully remove (by turning counterclockwise) the old orifice using the 2 mmallen wrench. (See Figure 7-32.)

CAUTIONUse only the provided 2 mm allen wrench or similar
particle free tool. Other allen wrenches can produce
particles that can plug the orifice.
Figure 7-32 Removal/installation of orifice

7 – 30Transpector CPM Operating Manual

6 Carefully press in place a new orifice gasket onto the new orifice.
7 Install the new orifice using a 2 mm allen wrench. Tighten the orifice to a torqueof 3-4 in-lbs (0.34 to 0.45 Nm), or approximately 1/4 turn (clockwise) past finger
tight. (See Figure 7-33.)

CAUTION
Overtightening the orifice may cause damage.
Figure 7-33 Installing a new orifice with orifice gasket

8 Install a new C-ring (HexBlock) or a new O-ring (Foreline Block). (Refer toFigure 7-31.)

9 Install the valve and four silver plated screws. (Refer to Figure 7-30.) The
screws must be tightened:

9a Using two fingers, lightly turn one screw until resistance is felt, then backthe screw out 1/8 turn. Repeat on the other three screws.

9b Using fingers, evenly tighten all four screws.
9c In 5 in-lb. (0.6 Nm) increments, tighten all four screws to a torque of
20 in-lb. (2.26 Nm).

10 Install valve cover and tighten its retaining screws with 2.5 mm allen wrench.
(Refer to Figure 7-29.)

7 – 31

Transpector CPM Operating Manual

Chapter 8
Diagnosing Problems
8.1 Introduction
Downtime can be reduced by diagnosing problems from observations related to thefailure, examining the FabGuard Event Logs, and checking hardware status.

8.2 Communication Problems
To correct communication problems, do the following:Is the Ethernet cable connected to the Transpector electronics module and thehost computer (either directly or through a router/switch)?



Does the Transpector sensor IP address have the same network prefix as thehost computer?



Is Port 80 open on the host computer?

Is there an IP address conflict between the Transpector sensor and anothernetwork device?

NOTE: Refer to Chapter 3, Connecting Transpector CPM for more information oncommunications problems.

8–1

Transpector CPM Operating Manual

8.3 CPM Symptom—Cause—Remedy Chart
Before proceeding, make sure that the insulation on all cables is intact. There must
be no damage to the insulating material. If there is, replace the cable.
Table 8-1 Symptom—Cause—Remedy Chart

SYMPTOM

CPM will not pump down

CAUSE

REMEDY

Forepump not
plugged inConnect cable to controller

Control cable missing or
bad connection

Check control cable

Foreline isolation valve notopening

Check valve actuation

Digital Pressure Switch
defective or not withinrequired pressure range

Replace the Digital
Pressure Switch

Foreline pressure too highdue to gas leak or
forepump diaphragm
failureFind Leak(s).

Turbo Molecular Pump
bearing drag excessive

Replace pump

Foreline pressure too highdue to water vapor inforeline hose

Run pumpdown and purgewith dry gas

No pneumatic pressure
applied to the foreline valve

Check supply andconnections to the foreline
block valves

Turbo Molecular Pump is
noisy

Bearing failure

Replace pump

Diaphragm Pump is noisy

Loose DiaphragmTighten Diaphragm

Analyzer pressure highwith sampling valvesclosedLeaks in manifold or
orificesTighten or replace gaskets

Seat leaks to process gas

Replace seat or valve

Turbo Molecular Pump
does not reach operating
speed

Verify incoming pneumaticpressure is between 58 and100 psi

Replace diaphragm. (referto section 7.6 on page 7-6)

8–2

Transpector CPM Operating Manual

Table 8-1 Symptom—Cause—Remedy Chart (continued)

SYMPTOMCAUSE

REMEDY

Process valve(s) don’t
open

Low air pressure

Check air pressure

Leaks in air lines

Listen/check for leaks

Water vapor high inbackground mass
spectrum

Exposure to air or water inprocess

Bake out manifold and Inlet
to 150 °C for 8 hours.
Check for water after cool
downPower indicator on
controller does notilluminate+24 V controller internal
power supply

Check input AC line voltage
to external power supply
Check +24 V input, verify
input range 20–30 V
Replace power supply

Power Indicator on
Transpector cable box
does not illuminate

No communication to
HOST computer

8–3

Controller electronics
failureReturn controller to
INFICON for repair

Controller is not on

Refer to section 2.2.1,
Attach Transpector
Electronics Module, on
page 2-2

CPM control cable isdisconnected

Check control cable atcontroller end and at cablebox endSensor IP address notcompatible with network

Refer to Chapter 3,
Connecting
Transpector CPM

Transpector
Communications port (port80) is not open on the hostcomputerOpen port 80 on the hostcomputer or change thecommunications port ofTranspector CPM

Cable connections

Make sure cables areconnected to proper
connectors

Host computer Ethernet
malfunction

Replace Ethernet Card on
host computerTranspector CPM Operating Manual

Table 8-1 Symptom—Cause—Remedy Chart (continued)

SYMPTOMEMISSION error (ColdStart, Warm Start)

CAUSE

REMEDY

Defective sensor filament
open, or shorted

Check sensor with OHM
meter
Replace sensor or filament

ANODE error

Electronics failure

Return to INFICON for
repairPressure too high at ion
sourceVerify ion source pressure
is less than 5E-4 Torr

Sensor Operating voltages
incorrect

Verify correct settings.
Contact INFICON for
assistanceTranspector CPM
electronics module not fully
engaged on sensor

Make sure that theTranspector CPM
electronics module ispushed completely on
sensor

Cable box not fully seatedon Transpector electronics
moduleEnsure cable box is fully
seated on Transpector
electronics module

Defective sensor, anodeshortedCheck sensor with Ohm
meter for shorts. See
sensor pin-out diagram
Fix or replace sensor

RF error

Electronics failure

Return to INFICON for
repairDefective sensor, RF leads
open

Fix or replace sensor

Electronics failure, RF/DC
card fault

Return to INFICON for
repair

8–4

Transpector CPM Operating Manual

Table 8-1 Symptom—Cause—Remedy Chart (continued)

SYMPTOM
Electron Multiplier error

CAUSE
Defective sensor, EM
shorted

REMEDY
Check sensor with Ohm
meter. See sensor pin-out
diagramFix or replace sensor

Temperature error

EM just replaced

Verify that EM is plugged
into the HV pin properly

Electronics failure

Return to INFICON for
repairTranspector CPM internalambient temp >70°C

Verify unit is installed
properly, ambient temp
<50°C
Verify that there are no heatsources in local proximity
Verify that the internal fan isproviding adequate airflow

Overpressure

Electrometer error

Electronics failure

Return to INFICON for
repairTotal Pressure Platecurrent exceeded trip
threshold

Reduce pressure at the ion
source to less than 5E-4
Torr

Total Pressure plate is
contaminatedReplace ion source

Process pressure too highfor sampling orifice

Reduce process pressure

Excessive current(>2E-6 Amps)

Reduce Pressure at the ion
sourceInstall proper orifice forprocess pressure

Reduce EM voltage
Electronics failure

8–5

Return to INFICON for
repair.

Transpector CPM Operating Manual

Table 8-1 Symptom—Cause—Remedy Chart (continued)

SYMPTOM
Mass filter error

CAUSE

REMEDY

Bad tune file

Retune RGA

Contaminated quadrupole

Return to INFICON for
repair

Incorrect ion source
settings

Load original configuration
file

Ion source contaminatedReplace ion source

EM voltage set too highReduce EM voltage

Detector not working
correctly

Replace EM detector

Incorrect DSP response
detected

Reset electronics module

DEC Communications
Error

Incorrect DEC response
detected

Reset electronics module

Peakfind Error

No peak at target mass

Upload original
configuration file

Ion source error

Detector error

DSP communications error

Return electronics module
to INFICON for repair.

Return electronics module
to INFICON for repair

Return electronics module
to INFICON for repair
Filament potential error

Insufficient vacuum

Verify pressure is less than
5E-4 Torr at the ion source

Filament broken

Verify integrity of filament

Filament shorted

Verify that filament is not
shorted to ground

Cable box not fully seatedon Transpector electronics
moduleEnsure Cable box is fully
seated on Transpector
electronics module

8–6Transpector CPM Operating Manual

Table 8-1 Symptom—Cause—Remedy Chart (continued)

SYMPTOM
Filament current error

Focus error

No spectra

CAUSE

REMEDY

Insufficient vacuum

Verify pressure is less than
5E-4 Torr at the ion source

Filament broken

Verify integrity of filament

Filament shorted

Verify that filament is not
shorted to ground

Cable box not fully seatedon Transpector electronics
moduleEnsure Cable box is fully
seated on Transpector
electronics module

Unable to start or maintainfocus voltage

Reset Electronics module

Emission is OFF

Turn Emission ON

EM is ON, when operating

Turn EM OFF

Contaminated sensor

Degas, or service sensor

Return electronics module
to INFICON for repair

Replace sensor

8–7Electronics Failure

Return to INFICON for
repairPressure too low for FC

Use EM detector

EM voltage too low

Increase voltage

Transpector CPM
electronics module not fully
engaged on sensor

Make sure that theTranspector CPM
electronics module ispushed completely on
sensorMass calibration

Adjust mass calibration

Transpector CPM Operating Manual

Table 8-1 Symptom—Cause—Remedy Chart (continued)

SYMPTOM
Poor
sensitivity

CAUSE
Sensor contaminated

REMEDY
Degas sensor
Bake-out sensor
Replace ion source

Ion source pressure too low

Increase process pressure,
if possible
Verify orifice is not blocked
and replace orifice ifnecessary

Poor peak shape

Mass calibration(resolution)

Adjust Mass Calibration,
increase peak width

Sensor operating
parameters set wrong

Check settings of: electronenergy, ion energy, focus
emission current

Improper calibration

Ensure that the totalpressure gauge used forsensitivity calibration wasproperly calibrated

Electronics failure

Return to INFICON for
repairEM has low gain

Replace sensor or EM

Sensor contaminatedDegas sensor
Bake-out sensor
Service sensor

Ion source pressure too
highVerify pressure is less than
5E-4 Torr at the ion source

Mass calibration required

Perform mass calibration

Electronics failure

Return to INFICON for
repair8–8

Transpector CPM Operating Manual

Table 8-1 Symptom—Cause—Remedy Chart (continued)

SYMPTOMHigh noise
level

CAUSE

REMEDY

System grounding

Verify that vacuum systemis groundedElectronics failure

Return to INFICON for
repairTranspector CPM
electronics module notmounted properly on
sensorEnsure the Transpector
CPM electronics module isfully seated on sensor

EM defective.

Replace EM assembly or
sensor.

Scan speed too fast forgain setting.

Increase dwell time.

8.4 If You Cannot Resolve Your Problem
Contact INFICON. (Refer to section 1.4 on page 1-4.)

8.5 Event Log Files
FabGuard Explorer software records Errors and Events with time of occurrence foreach day of operation, providing a chronology of operations that can be useful indiagnosing problems. See FabGuard Explorer Operating Manual (PN 074-528-P1)
for additional information.

8–9

Transpector CPM Operating Manual

Chapter 9
Recommended Parts List
9.1 Ordering Information
To contact INFICON order services regarding Transpector CPM, please use thefollowing contact information:
INFICON, Inc.
Two Technology Place
East Syracuse, NY 13057
USA
Tel: +315.434.1100
E-mail: reachus@inficon.com

9.2 CPM Consumable Parts
The following consumable parts should be readily available.
Table 9-1 Consumables

Part Number

Description

059-196

4-VCR gasket

059-0400

Replacement c-ring

070-1042

Viton O-ring (V4 only)

923-706-G6

10 mTorr HexBlock orifice with gasket

923-706-G8

15 mTorr HexBlock orifice with gasket

923-706-G5

100 mTorr HexBlock orifice with gasket

923-706-G7

360 mTorr HexBlock orifice with gasket

923-706-G4

1 Torr HexBlock orifice with gasket

923-706-G9

3 Torr HexBlock orifice with gasket

923-706-G3

10 Torr HexBlock orifice with gasket

923-706-G10

30 Torr HexBlock orifice with gasket

923-707-G3

7 Torr HexBlock sniffer kit (30.5 cm length)923-707-G1

10 Torr HexBlock sniffer kit (5 cm length)923-707-G2

100 Torr HexBlock sniffer kit (5 cm length)9–1Transpector CPM Operating Manual

Table 9-1 Consumables

Part Number

9–2

Description

922-204-G1

1.5 m capillary assembly kit

922-204-G3

3 m capillary assembly kit

923-706-G8

Bypass orifice kit

Transpector CPM Operating Manual

9.3 Preventative Maintenance Parts
The following preventative maintenance kits should be readily available.
Table 9-2 Preventative maintenance kits

INFICON Part Number

Description

923-712-G1

Spare HexBlock Orifice Gaskets (pack of five)923-711-G1

HexBlock Valve Replacement Kit

923-710-G1

HexBlock Orifice Replacement Tools

964-710-G1

CPM Tungsten Filament Kit

964-710-G2

CPM Coated Filament Kit

964-711-G1

CPM Tungsten Ion Source Kit

964-711-G2

CPM Tungsten Ion Source Kit with Anode Liner

964-712-G1

CPM Coated Ion Source Kit

964-712-G2

CPM Coated Ion Source Kit with Anode Liner

923-418-G1

Replacement Diaphragm Kit for Two-Stage Pump

9.4 Replacement Spare Parts
The following spare parts should be readily available.
Table 9-3 Replacement spare parts

INFICON Part Number

Description

964-403-P1

CPM Manifold Heater

059-0400

Replacement C-ring

032-0079

Turbo Molecular Pump (with CF40 flange)

923-403-P2

CPM Valve Block964-208-G11

1 Torr CPM CDG

964-208-G12

10 Torr CPM CDG

964-208-G13

100 Torr CPM CDG

964-208-G141000 Torr CPM CDG

964-230-G1

CPM Cable Box Assembly

923-417-G1

Foreline Check Valve Kit

9–3

Transpector CPM Operating Manual

Chapter 10
FabGuard Explorer Operation
10.1 Operation (FabGuard Explorer)
Transpector CPM can be operated by any version of FabGuard gas analysis
software. This chapter provides information on how to use FabGuard Explorer tooperate the Transpector CPM Gas Analysis System.
FabGuard Explorer uses a bin to collect a specific piece of data. Bins collectselected masses (e.g., 2, 4, 18, 28) as opposed to collecting an entire range of
masses (e.g., analog scan from 2 to 28, where each mass is collected for everyscan).

10.2 Introduction
FabGuard Explorer software operates under Windows 7 and Windows 8.
FabGuard Explorer provides valve control through recipes, manual control ofcomponents, and status information. It provides basic residual gas analyzer
features, including trend analysis, bar graph, leak check, and analog/selected peakmodes. Process monitoring includes recipe generation, automated data collection,
norm generation, and process deviation.
NOTE: Additional information concerning FabGuard Explorer is located in the
FabGuard Explorer Operating Manual, PN 074-528-P1.
This chapter assumes that the Transpector CPM Gas Analysis System is properly
installed, and FabGuard Explorer software is installed and running on the computer
intended to control the Transpector CPM Gas Analysis System.

10 – 1

Transpector CPM Operating Manual

10.3 Connecting to Transpector CPM
1 Click Start and select FabGuard Explorer.
2 When FabGuard Explorer is opened for the first time, the message shown in
Figure 10-1 will display.
Figure 10-1 Transpector connection prompt

3 Click Yes.
4 The Connection Type message is displayed. Select MP RGA HTTP as theconnection type and Click OK. (See Figure 10-2.)
Figure 10-2 Transpector connection type10 – 2

Transpector CPM Operating Manual

5 The TCP/IP dialog box will open. To add a sensor, click Add and select RGA
MPx.(See Figure 10-3.)
Figure 10-3 Transpector connections menu

6 In the Device pane, Type the Transpector IP address in the IP box.
(See Figure 10-4.)

7 Type the port number in the Port box
8 Click Add OK.
Figure 10-4 Device IP address

NOTE: Transpector MP sensors ship with a default IP address of
192.168.1.100 and a default Port of 80. If this IP address is notcompatible with your network, the IP address can be changed using
the INFICON Mass Spectrometer Search Utility.

9 Click Add OK.

10 – 3

Transpector CPM Operating Manual

10.4 RGA Configuration—CPM tab
The Transpector CPM system must be configured before use. This section
explains the CPM tab in detail (See Figure 10-5.), but not the additional tabs in the
RGA Configuration window. Additional information is located in the
FabGuard Explorer Operating Manual (PN 074-528-P1).
Figure 10-5 RGA Configuration: CPM tab

10 – 4

Transpector CPM Operating Manual

10.4.1 Valves and Orifices pane
Orifices in the HexBlock inlet system are replaceable. Transpector CPM is set up
in the factory with the correct valve and orifice values. However, if a valve or orifice
is changed, the new configuration must be entered in the RGA Configuration.
10.4.1.1 Inlet LP
Defines the size of the orifice in the V1 Low Pressure (LP) valve. (See Figure 10-6.)Enter the pressure for the orifice currently installed in V1. Note that the scale isin millitorr.



If no orifice is installed in V1, clear the check box.

Figure 10-6 Inlet LP

10.4.1.2 Inlet HP
Defines the size of the orifice in the V2 High Pressure (HP) valve.
Enter the pressure for the orifice currently installed in V2. Note that the scale isin millitorr.


If using a sniffer, enter the appropriate sniffer pressure range.



If using an atmospheric CPM, enter 760000 millitorr.

If no orifice is installed in V2, clear the check box.

Figure 10-7 Inlet HP

10.4.1.2.1 Inlet HC
If the V3 High Conductance (HC) valve is installed, select the box check.
Figure 10-8 Inlet HC

10.4.1.2.2 Inlet Bypass
If the V4 Bypass valve is installed, select the check box.
Figure 10-9 Inlet Bypass

10 – 5

Transpector CPM Operating Manual

10.4.1.2.3 Inlet Calibration
Defines the V5 Calibration valve.


If a standard calibration gas is installed, select Ar standard.



If a high mass tuning reference gas is installed, select FC5311 standard.



If V5 is not installed, select No Valve.

Figure 10-10 Inlet Calibration

10.4.2 Gauges pane
10.4.2.1 Process Gauge
The Transpector CPM includes an optional CDG (capacitance diaphragm gauge).


If the CDG is installed, enter its appropriate pressure range. Note that the scale
is in millitorr.



If the CDG is not installed, clear the check box.

Figure 10-11 Process gauge

10 – 6

Transpector CPM Operating Manual

10.4.3 Bypass Delay - Interlock between V2 and V4
Bypass Delay defines the interlock between V2 (HP) and V4 (Bypass) valves. The
time entered (in seconds) determines:

1 How long the V4 (Bypass) valve will be open before the V2 (HP) valve will be
opened2 How long the V4 (Bypass) valve will remain open after the V2 (HP) valve has
been closed.
This interlock between V4 (Bypass) and V2 (HP) is only active when using V2 (HP)in recipes. When opening V2 (HP) in Configuration monitor, this interlock is not
active.
Figure 10-12 Pumping Timers pane

10 – 7

Transpector CPM Operating Manual

10.5 CPM Configuration Monitor
The Configuration Monitor allows experimentation to determine the combinationof data acquisition parameters that provide the most appropriate runs. Dataacquisition parameters can be changed and the effect of the change is displayed.
NOTE: The CPM Configuration Monitor window is different from the open ion
source instruments’ Sensor window because of the pumping and inlet
systems on the CPM.
Figure 10-13 Transpector CPM configuration monitor

Turbo Pump Speed
Bakeout Button
RGA Total
Pressure

Process
Pressure

Edit Data
Acquisition
Parameters
Current Data
AcquisitionParameters

Valve
StatusForeline
Pressure

Pump Down
Buttons
Shut Down
Button1 Pump down the system.
1a Click Pump Down (inlets closed) to start the foreline and turbo pumps
and open the foreline valve. Select Pump Down (inlets open) if there isan additional isolation valve in front of the Hexblock and the volume
between the isolation valve and the Hexblock needs to be pumped down.
See Figure 10-14 on page 10-9 for approximate times to pump down
trapped volumes.

10 – 8Transpector CPM Operating Manual

Figure 10-14 Pumpout time for trapped volumes

Time to Pump Out from 1 Atm to 1 mTorr (minutes)

10000

1000

V1 - 10T (20u);
V2 - 10T (20u)
V1 - 10T (20u);
V2 - 10T (20u) + Bypass
V1 - 1T (62u);
V2 - 10T (20u)
V1 - 1T (62u);
V2 - 10T (20u) + Bypass
V1 - 360mT (120u);
V2 - 10T (20u)
V1 - 100mT (200u);
V2 - 10T (20u)

100

10

1

0.1
10

100

1000

Trapped Volume with 1 Atm (cc)1b The foreline Valve Status indicator will change color from dark blue togreen.

1c The Turbo Pump Speed will increase to 90,000 rpm.
1d Once the turbo pump reaches normal speed, a pumpdown delay occurs
before data can be collected. The default pumpdown delay is 300 seconds(five minutes).

2 Bake out the CPM.
2a Click Start Timed Bakeout.
2b Select a bakeout time. A normal bakeout is eight hours.
3 Click Configure to change CPM Hardware Configuration settings.
4 Click Emission. The sensor filament is off the first time Configuration Monitor
is run. The Emission button will be dark blue. It will progress to yellow andfinally green to signify that the EM is on. (See Figure 10-15.)
Figure 10-15 Emission status

10 – 9Transpector CPM Operating Manual

5 Click Multiplier to turn on the electron multiplier. The Multiplier button will becolored dark blue. It will progress to yellow and finally green to signify that the
EM is on. (See Figure 10-16.)
Figure 10-16 Multiplier status

6 Click Edit to alter the sensor’s data acquisition parameters (see Figure 10-18
on page 10-11). For more information on data acquisition parameters, refer tothe FabGuard Explorer Operating Manual.
NOTE: Maintain a detailed log of the changes to the sensor’s data acquisition
parameters.
Figure 10-17 Monitor Setup

7 Choose which (if any) inlets to open to monitor the sensor configuration.


Do not open an inlet when monitoring the residual gas inside of the CPM toobtain a background scan of the CPM sensor.



The illustration in the bottom pane of the Configuration Monitor window isrepresentative of the CPM. Installed valves are represented. In Figure
10-18, a CPM with V1, V2, V3, V4 and V5 installed is depicted.

10 – 10

Transpector CPM Operating Manual

Figure 10-18 Configuration monitor window illustration

Determine which valve to open.
V1 (LP) —low pressure valve

V2 (HP) —high pressure valve (tied to V4, the bypass valve)

V3 (HC) —high conductance valve (used if the sensor’s processconnection is under high vacuum)

V4 (Bypass)—bypass valve (used in conjunction with V2)

V5 (Calibration) —calibration valve (available if a calibration gas isinstalled)

To open the valve, click on the Valve Status indicator in the CPM figure at
the bottom of the screen. The Valve Status indicator will switch from dark
blue to green.

8 Click Start Configuration Monitor. The sensor will begin collecting data withthe configuration set up using the chosen data acquisition parameters.

9 If the data is satisfactory, log the parameters and save the configuration. Usethese data acquisition parameters in any data collection method.

10 If the data is unsatisfactory, repeat this procedure with different parameters.
CAUTIONCIS Pressure (Torr) is calibrated in the factory at
40 eV electron energy at 200 µA emission current.
Changing electron energy and/or emission current willcause incorrect CIS pressure readings.

10 – 11

Transpector CPM Operating Manual

10.6 CPM Sensor Acquisition Defaults
10.6.1 What to Acquire (RGAs)
The What to Acquire parameters decide the data that the Transpector CPM willcollect. This menu is very similar for both CPMs and Open Ion Source RGAs.
10.6.1.1 Acquisition Modes
There are two different acquisition modes: Spectrum (Scans) andSelected Masses (Bins). (See Figure 10-19.)
Figure 10-19 Acquisition modesSpectrum (Scans) is the default mode of data acquisition in
FabGuard Explorer. This mode will take data across a user-definedmass range. (See Figure 10-20.)
Figure 10-20 What to Acquire—Spectrum

10 – 12Transpector CPM Operating Manual

Selected Masses (Bins) mode allows data collection of specific masses.
Figure 10-21 What to Acquire—Selected Masses

10 – 13

Transpector CPM Operating Manual

10.6.1.1.1 Spectrum Mode Acquisition Parameters
Figure 10-22 Spectrum mode acquisition parameters

Start Mass (amu) . . . . . . . . . . . . . . The amu at which the RGA will
begin scanning.
Stop Mass (amu). . . . . . . . . . . . . . . The amu at which the RGA willstop scanning.
Points per amu . . . . . . . . . . . . . . . . The number of points per amu (ppamu) that
the RGA will monitor.
Setting a Stop Mass value outside of the sensor’s 2222range will create an error.
For example, if a 200 amu sensor is installed, FabGuard Explorer will not allow a
250 amu Stop Mass.
Increasing the number of ppamu will increase the total time it takes to perform a fullscan. In FabGuard Explorer, there are four different options for ppamu values: 1, 2,
5 and 10 ppamu.

10 – 14

Transpector CPM Operating Manual

10.6.1.2 Selected Masses Mode
It is possible to define specific masses of interest in Selected Masses Mode.
Transpector CPM advanced sensor functions can be tracked as individual bins inthis data acquisition mode. (See Figure 10-23.)
Figure 10-23 Selected masses mode

10 – 15

Transpector CPM Operating Manual

10.6.1.2.1 Existing Masses
Editing Masses
If a mass has already been added but the mass has the wrong identity for theprocess, click Edit to open the Mass Properties window and change the identity.
(See Figure 10-24.)
For example, a process may require monitoring of carbon monoxide. Since carbon
monoxide has the same mass as nitrogen (28 amu), the identity of mass 28 must
be changed from nitrogen to carbon monoxide in the Identity list.
Dwell time can be changed in the Dwell list.
In the Relay list, thresholds can be set up to open or close relays based on thesignal of the mass bin. (See Figure 10-24.)
Figure 10-24 Mass properties

CAUTION
Editing a special bin, such as Ionizer State, will display anerror message. (See Figure 10-25.)

10 – 16

Transpector CPM Operating Manual

Figure 10-25 Editing special bins not allowed

Removing Masses
Click Remove to remove an individual mass. (See Figure 10-26.)
Click Remove All to remove all of the masses. (See Figure 10-27.)
Figure 10-26 Remove

Figure 10-27 Remove All

10.6.1.2.2 Adding Masses
FabGuard Explorer allows masses to be added to the mass list for the sensor.
Dwell Time for New Bins
When collecting data with Bin Independent dwell times, the Dwell Time for New
Bins can be set to any value.
NOTE: The dwell time for each mass can be changed by editing the mass.
This new dwell time will be used for all newly created masses.
Figure 10-28 Dwell time for new bins

Add Mass
Adds a mass to monitor by identifying a specific mass in amu, either defining it
manually or using the auto select function to name the mass. After entering themass value in the Mass: box and selecting the Identity, click Add.

10 – 17

Transpector CPM Operating Manual

Figure 10-29 Add mass

10 – 18

Transpector CPM Operating Manual

Add Masses from Chemistry Library
Allows the selection of peaks based on chemicals that are present in a process.
A compound is selected to monitor. The mass spectrum for the specific compound
will be displayed in the graph. After clicking Add, the masses in the spectrum will
be added to the active bin list.
Figure 10-30 Add masses from chemistry library

NOTE: An error message will be displayed if a compound is added that shares amass with a compound that has previously been added.
FabGuard Explorer can only associate each mass with one chemicalcompound. For instance, if air is added to the active mass list and thennitrogen added afterwards, an error will display because two masses havealready been assigned 14 amu and 28 amu.
Figure 10-31 Sensor bin already exists

Add Advanced Sensor Information
Adds bins that measure advanced sensor functions. The most commonly used bins
are the Analog Input(s) bin(s) and the Pressure bin. Once the bin of interest has
been selected, click Add and the bin will be added to the list of active bins.
Figure 10-32 Advanced sensor information

10 – 19

Transpector CPM Operating Manual

10.6.2 How to Acquire (CPM)
The How to Acquire menu for the CPM (see Figure 10-33) is similar to the OpenIon Source RGAs. However, there are a number of differences due to the additional
valve assembly and pumping system of the CPM.
Figure 10-33 How to acquire CPM

10 – 20

Transpector CPM Operating Manual

10.6.2.1 Ionizer Presets
Determines the ionization energy with which the sensor collects data.
Figure 10-34 Ionizer presets

Low selects the sensor’s low ionization energy for the run.

High selects the sensor’s high ionization energy for the run.

10.6.2.2 Start Parameters
The Start Parameters define how and when the sensor starts acquiring data.
10.6.2.2.1 Start Mode TypeThe Start Mode Type defines when the sensor starts collecting data. (See Figure
10-35.)
Figure 10-35 Start mode type10 – 21Immediate starts the run immediately after the run is started.

Maximum Signal starts the run after the sensor sees a defined maximum
signal. The signal is set by the Data Threshold. (See section 10.6.2.2.2)

Pressure Above starts the run immediately after an increase in the internal
RGA total pressure above the user-defined Data Threshold. Emission must be
ON prior to recipe start for this mode to function.

Pressure Below starts the run immediately after a decrease in the internal
RGA total pressure below the user-defined Data Threshold. Emission must be
ON prior to recipe start for this mode to function.

Analog 1 Above starts the run after an increase in voltage above theuser-defined Data Threshold.



Analog 1 Below starts the run after a decrease in voltage below theuser-defined Data Threshold.

Transpector CPM Operating Manual

10.6.2.2.2 Data Threshold
Defines the threshold that the Start Mode Type utilizes to determine when the run
will start. The Data Threshold is set in units corresponding to the Start Mode Typeselected. Maximum Signal is in units of current, Pressure Above/Below is inunits of pressure, and Analog 1 Above/Below is in units of volts. (See Figure
10-36.)
Figure 10-36 Data Threshold

10.6.2.2.3 Emission
Defines the mode of the filament when the run starts. (See Figure 10-37.)
If Emission is not turned on, data will not be collected.
Figure 10-37 Emission

As Is uses the current status of the filament.

Off starts the data acquisition with the filament off.

On starts the data acquisition with the filament on.

10.6.2.2.4 Multiplier
Defines the mode of the electron multiplier when the run starts. (See Figure 10-38.)
Figure 10-38 Multiplier

As Is uses the current status of the EM.

Off starts the data acquisition with the EM off.

On starts the data acquisition with the EM on.

10.6.2.2.5 Relay 1
Defines the state of Relay 1 when the run starts


As Is leaves the relay in its current state at the beginning of the run.

Open opens the relay at the beginning of the run.



Close closes the relay at the beginning of the run.

10 – 22

Transpector CPM Operating Manual

10.6.2.3 Stop Parameters
Defines how and when the data acquisition stops.
10.6.2.3.1 Stop Mode TypeDefines when the data acquisition stops. (See Figure 10-39.)
Figure 10-39 Stop mode CPMTime (s) stops the acquisition after a set period of time.

Maximum Signal stops the run after the sensor sees a defined maximum
signal. The signal is set by the Data Threshold. (See section 10.6.2.3.2.)

Pressure Above stops the run immediately after an increase in the internal
RGA total pressure above the user-defined Data Threshold.

Pressure Below stops the run immediately after a decrease in the internal
RGA total pressure below the user-defined Data Threshold.



Analog 1 Above stops the run after an increase in voltage above theuser-defined Data Threshold.



Analog 1 Below stops the run after a decrease in voltage above theuser-defined Data Threshold.



Number of Points stops the run after collecting a user-defined number ofscans.

10.6.2.3.2 Data Threshold
Defines the threshold that the Stop Mode Type utilizes to determine when the run
will stop. The Data Threshold is set in units corresponding to the Start Mode Typeselected. Maximum Signal is in units of current, Pressure Above/Below is inunits of pressure, and Analog 1 Above/Below is in units of voltage. (See Figure
10-40.)
Figure 10-40 Data threshold (stop mode)

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10.6.2.3.3 Maximum Duration
Defines the length of time in seconds that the RGA will collect data if using Time
as a stop mode. If using a different stop mode, Maximum Duration defines the
maximum amount of time that the RGA will collect data. (See Figure 10-41.)
Figure 10-41 Maximum duration

NOTE: If the data acquisition ends due to the Maximum Duration when its Stop
Mode Type is not set to Time, an alarm will occur. For more informationon alarms, refer to Chapter 8.
10.6.2.3.4 Emission
Defines the mode of the filament when the run stops. It is recommended to turn off
the filament if the sensor will be exposed to high pressures following a run. (SeeFigure 10-42.)
Figure 10-42 Emission

As Is uses the current status of the filament.

Off stops the data acquisition with the filament off.

On stops the data acquisition with the filament on.

10.6.2.3.5 Multiplier
Defines the mode of the electron multiplier when the run stops. It is recommended
to turn off the EM if the sensor will be exposed to high pressures following a run.
(See Figure 10-43.)
Figure 10-43 Multiplier

As Is uses the current status of the EM.

Off starts the data acquisition with the EM off.

On starts the data acquisition with the EM on.

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10.6.2.3.6 Relay 1
Defines the state of Relay 1 when the run stops.
As Is leaves the relay in its current state at the end of the run.

Open opens the relay at the end of the run.



Close closes the relay at the end of the run.

10.6.2.4 Dwell
Determines how and for how long the RGA collects data at each point.
10.6.2.4.1 Dwell Mode
Determines how the dwell is chosen for each data point. This option is changeable
only when in Selected Masses mode. (See Figure 10-44.)
Figure 10-44 Dwell mode

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

Bin Independent uses the same dwell time for each data point.



Bin Specific is only available when running in Selected Masses mode. This
choice allows for each mass to have a specific dwell time. This methodology isdesirable if a peak of interest has an unusually noisy response.
FabGuard Explorer can be set to dwell at that peak for a longer time period,
which will decrease the noise and increase the signal-to-noise ratio.

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10.6.2.4.2 Dwell TimeDefines the amount of time in milliseconds (ms) that FabGuard Explorer will collectdata at every data point. In general, the longer the dwell time, the lower the noiseof the signal. Longer dwell times at each point will result in longer overall scantimes. Dwell Time is only selectable when Bin Independent is chosen as theDwell Mode. (See Figure 10-45.)
Figure 10-45 Dwell time

10.6.2.5 Delay
Defines whether FabGuard Explorer will add additional wait time after the sensor
has completed a full scan.
10.6.2.5.1 Delay Mode
Figure 10-46 Delay modeMinimum sets the Time Between Scans to its minimum value. After thesensor has completed a scan, no additional wait time will be added to the scan
by FabGuard Explorer.



Manual allows the operator to set an additional delay time after the sensor
completes the scan.

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10.6.2.5.2 Time Between Scans
Time Between Scans can be set to a value greater than the minimum scan time
if additional wait time is desired. This field can only be set if Manual is chosen as
the Delay Mode.
Figure 10-47 Time between scans

NOTE: Time Between Scans cannot be set lower than the minimum scan time.
10.6.2.5.3 Stabilization Time
Stabilization Time is the amount of time FabGuard Explorer waits after the Start
Mode condition has been met before setting the Emission and EM to their specified
Start states and beginning data acquisition. For example, if the recipe starts basedon an analog input and an additional wait time is desired before the Emission isturned on.
10.6.2.6 Correction
Defines the type of Baseline correction used by FabGuard Explorer (if any
correction at all) and whether or not Peak Lock is turned on.
10.6.2.6.1 Baseline
Sets the Baseline to Off or Mono. For more information, refer to the FabGuard
Explorer Operating Manual.
Figure 10-48 Baseline

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10.6.2.6.2 Peak Lock
Figure 10-49 Peak lockPeak Lock is a method of fine tuning the sensor while it is collecting data. Peak
Lock is only available when running at 1 ppamu (either in spectrum mode or
selected masses mode). Peak Lock collects data around the peak while looking forthe maximum signal. Peak Lock then defines the maximum signal as being the true
location of the mass of interest. This is helpful because peaks can drift as a sensor
runs, but retuning constantly can be too time consuming.
It is recommended that Peak Lock be turned On. Peak Lock should only bedisabled if extremely fast data acquisition is needed and the peak position iscarefully set.
10.6.2.7 Inlet
Defines the inlet that is opened for the run, and whether it is closed after the dataacquisition is over. (See Figure 10-50.)
Figure 10-50 Inlet



None does not open any valves for the data acquisition. This would give datathat is only representative of the background of the CPM.

LP opens the V1, low pressure valve.

HP with bypass opens the V2, high pressure valve, with the bypass valve, V4.



HP without BP opens the V2, high pressure valve, without the bypass valve.
This is not recommended because the response time of the CPM can be muchslower without the bypass.

Bypass opens the V4, bypass valve.

HC opens the V3, high conductance valve. This valve is used primarily tomonitor process chamber background and should not be used for higher
pressures.



Cal Gas opens the V5, calibration gas valve. With this valve open, the sensor
will only monitor the calibration gas. This is useful when tuning and calibrating
the sensor.

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10.6.2.7.1 Close After
Figure 10-51 Close after

Defines the status of the selected valve after data collection is over. If Yes ischosen, the valve will be closed at the end of the data acquisition.
10.6.2.7.2 Duty Cycle
When sampling aggressive gases, do not expose Transpector CPM to theaggressive gas for long periods of time. The CPM Inlet can be automatically
opened and closed in a duty cycle. To use the duty cycle feature, the Open timeand Close time must be defined. (See Figure 10-52.)
Figure 10-52 Duty cycle

10.6.2.8 Heater
The Heater parameter controls the CPM heating jacket while the RGA is acquiringdata. The heater can be set to As Is, Off, Low (90ºC), or High (150ºC).
Figure 10-53 Heater

10.6.2.8.1 Off After
Selecting Yes from the Off After list will turn the heater off at the end of the dataacquisition.
Figure 10-54 Off after

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Chapter 11
Glossary
Anode
The anode is the structure in the ion source in which ions are created byelectron impact. It can be formed from a mesh, such as in the open ion
source, or from a solid tube, such as in the closed ion source. Its electricalpotential is positive with respect to the filament, focus lens, total pressure
plate, pole zero, exit aperture and Faraday cup.
Appearance Potential
The minimum electron energy required to produce, by electron
bombardment, a given ion in its lowest energy state.
Atomic Mass Unit (AMU)
An atomic mass unit is a unit of measurement for the mass of a molecule
or ion. It is based on the definition that the mass of an atom of the
carbon-12 isotope is exactly 12.
BackgroundThe background is the residual atmosphere in a vacuum apparatus when
no gases are being deliberately introduced.
Bakeout
A bakeout is the process of heating a vacuum chamber above the ambient
temperature in order to accelerate the desorption of species such as water
vapor and hydrocarbons which are adsorbed onto the inner surfaces of thevacuum chamber.
Center Voltage
The center voltage is the DC potential to which the quadrupole rod RF anddifferential DC potentials are referenced.
Closed Ion Source (CIS)
The closed ion source is an ion source in which the pressure in theionization region is higher than in the rest of the analyzer sensor. This is
usually accomplished by fabricating the anode from a solid walled tube
instead of an open mesh. This type of source is usually employed tomeasure trace contaminant levels in a process gas.
ConductanceThe conductance of a gas flow channel is the ratio of the gas quantity
flowing through the channel to the pressure drop across that channel.
Cracking Pattern
See Fragmentation Pattern.

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Detection Factor
The detection factor is the ratio of the detected signal for a given ion
current from a certain substance to the detected signal for the same ion
current of nitrogen ions as measured at mass 28. For Faraday cup
detectors, the detection factor is usually 1. For electron multiplierdetectors, this factor depends on the mass and chemical nature of the ion.
Detector
The detector is that part of the mass spectrometer sensor which convertsa beam of ions into an electrical signal.
Doubly Charged Ion
For positive ions, a doubly charged ion is a parent or fragment ion where
two electrons have been removed.
Electron Energy
The electron energy is the kinetic energy of the ionizing electrons in anelectron bombardment ion source and is typically measured in units ofelectron volts (eV). The electron energy is approximately equal to thedifference between the bias voltage on the filament and the anode
potential, times the electron charge.
Electron Multiplier
An electron multiplier is a in situ amplifier which is used to increase thesensitivity of a mass spectrometer. When a high voltage is applied to anelectron multiplier, positive ions are accelerated into the multiplier, causing
the release of a large number of electrons per incident ion at the output.
Emission Current
The emission current is the current of electrons leaving the surface of aheated filament.
Exit Aperture (Quadrupole)
The exit aperture is a focus lens at the ion exit (detector) end of aquadrupole mass spectrometer. This lens is often biased by a potentialthat is negative with respect to the quadrupole center voltage such thations are extracted from the exit end of the quadrupole and focused into thedetector.
Extractor
See Focus Lens.
Faraday Cup
The Faraday Cup is a detector for ions and/or electrons consisting of a cup
shaped, conductive electrode.
Filament
The filament is a fine wire or ribbon, which, when heated by means ofelectrical current, emits electrons. The filament typically made of iridiumwith a thorium or yttrium oxide coating, or of tungsten or a tungsten alloy.

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Focus Lens
The focus lens is a conductive aperture located next to, and usually biased
negatively with respect to, the anode. Its purpose is to draw the ions out of
the anode, form them into a beam, and focus them into the next lenselement.
Fragment Ion
A fragment ion is an ion with fewer atoms than the parent gas moleculefrom which the ion is produced. The mass of the fragment ion is always
less than that of the parent ion.
Fragmentation Factor
The fragmentation factor is the fraction of the total ions produced from a
specified substance which have a given mass. The sum of thefragmentation factors for all of the ions produced from a specified
substance is equal to one.
Fragmentation Pattern
The fragmentation pattern is the pattern of ion masses and intensities
produced by electron bombardment of a specified gas species astransmitted by the mass filter, detected and recorded.
Gain (Electron Multiplier)
The gain of an electron multiplier is the ratio of incident ion current toelectron current output. The gain of the multiplier is a strong function of thebias potential applied across it.
Ion
An ion is a molecule or atom which has either lost or added one or more
electrons. Those molecules which have lost electrons are positive ions.
Those molecules which have added electrons are negative ions.
Ion Current
An ion current is the rate of flow of electrical charge associated with theflow of ions.
Ion Energy
The ion energy is the kinetic energy associated with a beam of ions. It isequal to the potential difference across which the ion beam is accelerated(or decelerated) times the charge on the ion, and is typically measured inelectron volts (eV). Specifically, in a quadrupole mass spectrometer, it is
the kinetic energy, along the axis, of the ions as they pass through themass filter. The ion energy is approximately equal to the anode potential
minus the quadrupole center voltage time the ionic charge.
Ion Source
The ion source is that part of a mass spectrometer in which neutral gas
molecules or atoms are ionized by electron bombardment.

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Ionization Probability
The ionization probability for a chemical substance is the ratio of the total
ion current (at all masses) produced from a given partial pressure of that
substance, to the total ion current produced from nitrogen at the same
partial pressure.
Isotope
The atom is composed of nucleus protons and neutrons surrounded by anelectron cloud. The chemical properties of an element are determined by
the number and arrangement of electrons (with -1 charge) in an atom. The
number of electrons in a neutral atom in turn depends on the number ofprotons (with +1 charge) within the nucleus of that atom. Atomic nuclei
also contain neutrons which, being uncharged, do not affect the chemistryof an element. Protons and neutrons have approximately the same mass,
which is approximately 1,800 times the mass of an electron. All atoms of agiven element have the same number of protons but not necessarily thesame number of neutrons. Atoms of the same element which have a
different number of neutrons are called isotopes. See Natural
Abundance.
Linearity
Linearity is the mathematical relationship between an ion current and thetotal or partial pressure giving rise to that current. A mass spectrometer issaid to have good linearity when the ion current is proportional to thepressure over a specified pressure range within a specified tolerance.
Typically (but not always), the ion current will be linear with pressure at thelow end of an instrument’s pressure range. At some pressure near thehigh pressure end of an instrument’s range, the ion current will be lessthan proportional to the pressure.
Mass to Charge Ratio
The mass to charge ratio is ratio of the mass of an ion to its charge,
usually expressed in atomic mass units per unit electron charge.
Mass Filter
The mass filter is that part of the mass spectrometer which separates abeam of ions by their mass to charge ratios.
Mass Spectrometer
A mass spectrometer is an instrument which ionizes a gas sample,
separates the resulting beam of ions by mass to charge ratio, and detects
the filtered ions as an electrical signal.
Mass Spectrum
A mass spectrum is a record of ion current as a function of mass to charge
ratio obtained with a mass spectrometer. The spectrum can be presented
as a graph with mass to charge ratio on the X-axis and ion current on the
Y-axis, or as a tabular listing of ion currents and the associated mass tocharge ratios.

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Material Factor
The material factor for a chemical substance is that part of the
proportionality constant between the partial pressure of that substanceand the resulting mass filtered ion current which depends on the chemical
nature of that substance but not the particular instrument used for thatmeasurement. The material factor is a function of the ionization probability
and fragmentation factor for the specified substance.
Mean Free Path
The mean free path is the average distance an ion, electron, atom, or
molecule can travel before colliding with an ambient gas molecule. The
mean free path is inversely proportional to the pressure.
Molecular Flow
Molecular flow is that motion of gas molecules wherein the collisionalmean free path is greater than the critical dimension of a flow constraining
element such as an orifice of tube diameter. The gas flow characteristics
are dominated by collisions between the gas molecules and theappropriate surfaces of the vacuum system.
Natural Abundance
The natural abundance of an isotope is the average percentage of all
atoms of a given element which have the same number of neutrons. For
example, 99.985% of all naturally occurring hydrogen atoms have noneutrons, giving an atomic mass of approximately 1, while 0.015% have
one neutron, giving an atomic mass of approximately 2. There is a thirdisotope of hydrogen which contains two neutrons, giving an atomic massof 3, but this isotope is unstable with such a short radioactive half life that it
is not normally naturally occurring in any significant quantity on earth.
There are occasions when observed an isotopic abundance will not reflect
the natural abundance. For instance, in semiconductor processing tools
know as ion implanters, it is not unusual for the BF3 boron dopant source
to be isotopically enriched to 99%+ of the boron-11 isotope (instead of thenaturally occurring 80.22%).
Open Ion Source (OIS)
An open ion source is an ion source constructed with an open grid
structure with high conductance between the ionization region and thevacuum region surrounding it. Residual gas analyzers are typicallyequipped with this type of ion source.
Outgassing
Outgassing is the evolution of gas which was dissolved in or adsorbed onsolid surfaces inside a vacuum chamber.
Parent Ion
A parent ion is an ion made by removing a single electron from theoriginal, or parent, gas molecule, and therefore has the same mass.

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Partial Pressure
The partial pressure is the pressure of a specific chemical component of agas mixture. The sum of all the partial pressures is the total pressure.
Pole Zero
See Center Voltage.
Quadrupole
A quadrupole is a mass filter consisting of four parallel electrodes or poles(hence quadrupole) arranged in a square array. Opposite poles areconnected together electrically such that an electric field of hyperbolic
geometry is produced. The potentials applied to these poles are asuperposition of variable DC and RF voltages, generally of fixed RF
frequency.
Repeller (Electron)
The electron repeller is an electrode located on the opposite side of thefilament than the anode. The repeller is usually biased at the samepotential as the negative side of the filament, or a more negative potential.
Residual Gas Analyzer
A residual gas analyzer is an instrument which is used to determine thequantities and chemical nature of gases present in a vacuum system. The
instrument is typically a mass spectrometer equipped with an open ion
source.
Resolution
Resolution is the ability of a mass filter to select between nearby masses.
It is typically measured as the mass of the peak divided by the width of agiven mass peak at 10% or 50% of the peak maximum intensity.
Secondary Electron
A secondary electron is an electron emitted from a surface when that
surface is struck by a sufficiently energetic ion, electron, neutral moleculeor photon.
Sensitivity
The sensitivity of a mass spectrometer is the ratio of ion current at a
specified mass from a specified gas to the partial pressure of that gas,
suitably corrected for background. The specified gas is typically nitrogen,measured at 28 AMU, although argon at 40 AMU is sometimes usedinstead, depending on the instrument.
Total Pressure
The total pressure is the force per unit area exerted by a gas on the wallsof its container. It is equal to the sum of all the partial pressures of thedifferent chemical species which comprise that gas.

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Total Pressure Plate
The total pressure plate, or collector, is an electrode in the ion source on
which at least a part of the ion beam impinges. The current striking thisplate is a function of the total pressure in the ion source.
Transition Flow
Transition flow is that motion of gas molecules wherein the collisionalmean free path is approximately the same as the critical dimension of aflow constraining element such as an orifice of tube diameter.
Transmission Factor
The transmission factor is the ratio of ion current detected at the exit endof the mass filter (set to transmit a given mass) to the current of ions of thesame mass entering the filter from the ion source. Typically, thetransmission factor for nitrogen ions at 28 AMU is set equal to 1. The
transmission factor at other masses is given relative to that for nitrogen.
Viscous Flow
Viscous flow is that motion of gas molecules wherein the collisional mean
free path is less than the critical dimension of a flow constraining element,such as an orifice of tube diameter. The gas flow characteristics are
dominated by collisions between gas molecules.
Zero Blast
Zero blast is the ion current which is not mass filtered and is detected
when the mass spectrometer is scanning near mass zero.

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Chapter 12
Bibliography
For further information on partial pressure analyzers, see Partial Pressure
Analyzers and Analysis, M. J. Drinkwine and D. Lichtman, American Vacuum
Society Monograph Series, or A User’s Guide to Vacuum Technology, J. F.
O’Hanlon, John Wiley and Sons (1989). The latter book also contains a wealth of
information on related topics including gas flow, pressure gauges, pumps,
materials, and the design of vacuum systems.

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