NANO Technology
ANT130-R Seriesnano Motion Technology

ANT130-R Series
Single-Axis Rotary Direct-Drive
Nanopositioning Stages
High resolution (0.01 arc sec)
High performance
Unlimited rotation
Outstanding error motion specifications
Excellent in-position stability
Multi-axis configurations
High dynamic performance

The ANT130-R and ANT130-R-PLUS direct-drive rotary stages
are designed as part of Aerotech’s nano Motion Technology
product family. Our rotary stages offer unprecedented inposition stability (0.005 arc sec) and sub 0.01 arc-sec
incremental motion performance, and are offered in two
grades of accuracy.

Multi-Axis Capabilities

0.53
0.48

0.11
0.1

0.44

0.09

0.39
0.34

0.08
0.07

0.29

0.06

0.24

0.05

0.19

0.04

0.15
0.1

0.03
0.02

0.05

0.01

00

0.05

Position (arc sec)

Position (rad)

The ANT130-R series is designed for compatibility and easy
integration with Aerotech’s ANT linear stage productofferings. Together these stages provide accuracy, stability,
and small-size performance capability for almost any nanomanufacturing or inspection application.

0.01
051015Time (sec)2025

ANT130-R 0.01 arc sec step plot. Best-in-class resolution andexceptional in-position stability for unlimited rotation stages.
See additional performance graphs on the following pages.

64

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Dynamic Performance
In addition to the high precision levels, these systems offer
high dynamic performance and throughput ideal for disk drive
manufacture and test.

Durability
The ANT130-R stage series was designed to operate in a
24/7 manufacturing environment. Unlike other rotary devices,
the ANT130-R requires no periodic maintenance, assuring
years of trouble-free operation.

Mechanical
Specifications

ANT130-20-R ANT130-20-R-PLUS ANT130-180-R ANT130-180-R-PLUS ANT130-360-R ANT130-360-R-PLUS
20°

20°

180°

180°

±360° Continuous

Accuracy(1)10 arc sec

3 arc sec

10 arc sec

3 arc sec

10 arc sec

3 arc sec

Resolution

0.01 arc sec

0.01 arc sec

0.01 arc sec

0.01 arc sec

0.01 arc sec

0.01 arc sec

Repeatability(Bi-Directional)(1)

1.5 arc sec

1.5 arc sec

1.5 arc sec

1.5 arc sec

1.5 arc sec

1.5 arc sec

Repeatability(Uni-Directional)

Rotation Angle±360° Continuous

0.5 arc sec

0.5 arc sec

0.5 arc sec

0.5 arc sec

0.5 arc sec

Tilt Error
Motion

NANA

NA

NA

10 arc sec

10 arc sec

Asynchronous

NANANANA

3 arc sec

3 arc sec

AxialError
Motion(1)Synchronous

NANA

NA

NA

2 µm

2 µm

Asynchronous

NANA

NA

NA

0.5 µm

0.5 µmRadialError
Motion(1)Synchronous

NA

NA

NA

NA

3 µm

3 µm

Asynchronous

NA

NA

NA

NA

1 µm

1 µm

20 rpm20 rpm20 rpm20 rpm200 rpm

200 rpm

Maximum Speed
Maximum Acceleration

400 rad/s2

400 rad/s2

400 rad/s2

400 rad/s2

400 rad/s2

400 rad/s2

In-Position Stability(2)0.005 arc sec

0.005 arc sec0.005 arc sec

0.005 arc sec

0.005 arc sec

0.005 arc sec

11 mm

11 mm

11 mm

11 mm

11 mm

11 mm

Aperture
Maximum Torque(Continuous)

0.2 Nm

0.2 Nm

0.2 Nm

0.2 Nm

0.2 Nm

0.2 NmAxial

3.0 kg (6.6 lb)

3.0 kg (6.6 lb)

3.0 kg (6.6 lb)

3.0 kg (6.6 lb)

3.0 kg (6.6 lb)

3.0 kg (6.6 lb)

Radial

2.0 kg (4.4 lb)

2.0 kg (4.4 lb)

2.0 kg (4.4 lb)

2.0 kg (4.4 lb)

2.0 kg (4.4 lb)

2.0 kg (4.4 lb)

Moment

3 Nm

3 Nm

3 Nm

3 Nm

3 Nm

3 Nm

Rotor Inertia (Unloaded)

0.001 kg-m2

0.001 kg-m2

0.001 kg-m2

0.001 kg-m2

0.0016 kg-m2

0.0016 kg-m2

Stage Mass

1.5 kg (3.3 lb)

1.5 kg (3.3 lb)

1.5 kg (3.3 lb)

1.5 kg (3.3 lb)

1.7 kg (3.74 lb)

1.7 kg (3.74 lb)

LoadCapacity(3)ANT130-R Series

0.5 arc sec

Synchronous

NANO Technology

ANT130-R/ANT130-R-PLUS Series SPECIFICATIONS

Aluminum Body/Black Hardcoat Finish

Material
MTBF (Mean Time
Between Failure)

30,000 Hours

Notes:
1. Certified with each stage. Requires the use of an Aerotech controller.
2. In-Position Jitter listing is 3 sigma value.
3. Axis orientation for on-axis loading is listed.
• Specifications are per axis, measured 25 mm above the tabletop. Consult factory for multi-axis or non-standard applications.
• All error motion specifications are measured at 60 rpm.
• For high speed operation, customer payload must be balanced to G1.0 per ISO 1940.

Electrical Specifications

ANT130-20-R
ANT130-20-R-PLUS

ANT130-180-R
ANT130-180-R-PLUS

Slotless, Brushless, Direct-Drive Rotary Motor

Drive SystemNoncontact Rotary Encoder

Feedback±40 VDC

Maximum Bus Voltage
Limit Switches

5 V, Normally Closed

Home Switch

Near Center

Recommended Controller

ANT130-20-R
ANT130-20-R-PLUS

ANT130-180-R
ANT130-180-R-PLUS

A3200

Npaq MXR
Npaq MR-MXH
Ndrive ML-MXH

Ensemble

Epaq MXR
Epaq MR-MXH
Ensemble ML-MXH

Soloist

Soloist ML-MXH

Multi-Axis

Single Axis

ANT130-360-R
ANT130-360-R-PLUS

ANT130-360-R
ANT130-360-R-PLUS

Notes:
1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within
0.25ºC/24 hours. If this is not possible, alternate products are available. Please consult Aerotech Application Engineering for more information.

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65

6.0

1.2

4.5

0.9

3.0

0.6

1.5

0.3

00

1.5

0.3

3.0

0.6

4.5

0.9

6.090
2 mError (arc sec)

Error (rad)

ANT130-R Series

NANO Technology

ANT130-R/ANT130-R-PLUS Series PERFORMANCE-2 m180

1.20100

200
Position (deg)2703000.003

0.012

0.002

0.008

0.002

0.004

0.001
00
0.004

0.001

0.008

0.002

0.012

0.002

0.016

0.003
024Time (s)6ANT130-R plot showing best-in-class in-position stability.

66

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Synchronous = 0.5 µm
Asynchronous = 0.2 µm

ANT130-R axial error plot illustrating outstanding synchronous andasynchronous error motion performance.

90
Position (arc sec)

Position (rad)

ANT130-R-PLUS accuracy plots showing excellent accuracy andbi-directional positioning capability.

0.016

02 m-2 m1800

270

Synchronous = 1.6 µm
Asynchronous = 0.3 µm

ANT130-R radial error plot illustrating outstanding synchronousand asynchronous error motion performance.

NANO Technology

ANT130-R/ANT130-R-PLUS DIMENSIONSC
1/2 HARDSTOPTRAVEL45°
TYP.

ANT130-R Series

B
1/2 LIMITTRAVELA
1/2 NOM.
TRAVELCUSTOMER MOUNTING
4.0
24x M4x0.7 HELICOILEQUALLY SPACED ON B.C.

50 B.C.

71 B.C.

APERTURE
1125PIN MOTOR/FEEDBACK CONNECTORHEIGHT = 262X

54

5.8 THRU

106 B.C

6835.4TYP

4050TYP75TYP~925
CABLE LENGTH

14612060TYP

CAPTIVE
STAGE MOUNTING
4x M6 SHCS
40263473TYP

65TYP

2613010TYP

12550

DIMENSIONS: MILLIMETERS

145

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671024.00

STAGE MOUNTING
4x M6x1 THRU

10050

ANT130-R Series

NANO Technology

ANT130-R/ANT130-R-PLUS Mounting Plate DIMENSIONS

50100

145
73TYP

1024.00

125512.00

2520 THRU

1050512.00

BREADBOARD MOUNTING PATTERN
6x M6 OR 1/4-20 SHCS C'BORE SLOTS

65TYP
130

DIMENSIONS: MILLIMETERS

ANT130-R/ANT130-R-PLUS Series ORDERING INFORMATION
ANT130-R Series Rotary Stage
ANT130-R
Aerotech direct-drive rotary positioner
Rotary Stage Travel
ANT130-20-R
20° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder,optical limits, and hard stops
ANT130-20-R-PLUS 20° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder,optical limits, and hard stops (high accuracy version)
ANT130-180-R
180° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary
encoder, optical limits, and hard stops
ANT130-180-R-PLUS 180° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary
encoder, optical limits, and hard stops (high accuracy version)
ANT130-360-R
360° continuous rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy
rotary encoder, and optical limits
ANT130-360-R-PLUS 360° continuous rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy
rotary encoder, and optical limits (high accuracy version)
Options-MP68

Breadboard mounting plate

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