nanoLong Travel

MotionHigh Accuracy

High Dynamic PerformanceHigh Resolution

Technology Easy-to-Use Software
5

5
4
3
2

1 nm/step

0.53
0.48

0.11
0.1

3

0.44

0.09

2

0.39
0.34

0.08
0.07

0.29

0.06

0.24

0.05

0.19

0.04

0.15
0.1

0.03
0.02

0.05

0.01

1
0
1
2
3

1
0

4

1

5
0

5

10

15

20

25

30

0

0

0.05

0

1

2

3

4

5

6

0.01

7

0

5

10
15
Time (sec)Time (s)Time (s)Linear Resolution of 1 nanometer

In-Position Stability <1 nanometer

20

25

Angular Resolution 0.01 arc sec
10

2.1
X AxisY Axis

6

3
2
1
0
-1
-2
-3
80

Yaw (µrad)

Accuracy Error (μm)

8

80
40

40
0

Position (mm)

-80

-80

0.8

2

0.4

0

0

2

0.4

4

0.8

6

1.2
1.7

10

-40

2.1
20

Position (mm)

1.2

4

8

0
-40

1.7

Yaw (arc sec)

7
6

4

Position (μrad)8

Position (nm)Position (nm)9Position (arc sec)

Review and Compare
11
10

10

0

10

20

Position (mm)

System Accuracy

XYθ Multi-Axis Nanopositioner

Yaw Error X,YLinear Systems

Rotary Systems

Multi-Axis Systems

Advancing the State-of-the-Art in High Precision Motion Systems Since 1970

Aerotech Worldwide
United States • Germany • United Kingdom • Japan • China

Dedicated to the Science of Motion
www.aerotech.com

The Future Has Arrived
Aerotech nano Motion Technology
Forty years ago there was a need by both the scientific community and the military aerospace companies for a manual adjustingmechanism to align and position test equipment with extremely high resolution over a large linear or angular range. Thismechanism also had to have excellent long-term stability.
Aerotech filled that need with a novel product – the patented Coarse and Fine Adjustment and Positioning Mechanism (US Pat.
No. 3,727,471). This large range and high resolution device was well-accepted and used by all of the leading research facilities.
By incorporating this device Aerotech developed products with a linear resolution of 25 nanometers over 50 millimeters of travel,and sub-arc-second angular resolution over a large angular range. The Coarse and Fine Adjustment and Positioning Mechanism
is still being used today.
In the ensuing years positioning and aligning requirements continued to grow, demanding ever higher performance in accuracy,
speed, and resolution. Aerotech responded with novel, state-of-the-art technologies resulting in products with up to 1.5 meters
travel length and submicron accuracy. These products broke productivity barriers by combining high speed and precision
positioning for maximized throughput.

High Throughput Nanopositioning
Our customers asked us to create equipment that would enable them to measure, manipulate, affect, and view sub-nanometer
structures over a large area. To achieve that goal Aerotech had to advance the state-of-the art in high precision motion control.
Aerotech nano Motion Technology (AnMT) incorporates best-in-class electronic and magnetic circuits, unique feedback
technology, dynamic trajectory management, application specific materials, and a powerful, easy-to-use control system. The result
is a large selection of linear, rotary, and multi-axis positioning systems with nanometer and sub-arc-second resolution, super-highaccuracies, and linear travel ranges from 25 to 160 millimeters and rotary travel ranges from 20 degrees to unlimited rotation.
These products are offered in three grades of accuracy – BASE, PLUS, and ULTRA – to enable our customers to select the rightprice/performance products for their specific application (see product specifications).
All AnMT products are calibrated and tested prior to shipment in our modern, environmentally controlled laboratory, utilizing thehighest accuracy and resolution test equipment available today.
To assist you in selecting the right product for your application, please visit our website for more information or call any of ourSales Departments listed below for assistance.

WORLD HEADQUARTERS
Aerotech, Inc.
101 Zeta Drive
Pittsburgh, PA 15238
Ph: 412-963-7470
Fax: 412-963-7459
Email: sales@aerotech.com
Aerotech, Ltd.
Jupiter House, Calleva Park
Aldermaston, Berkshire
RG7 8NN, UK
Ph: +44-118-9409400
Fax: +44-118-9409401
Email: sales@aerotech.co.uk

2

www.aerotech.com

Aerotech GmbH
Südwestpark 90
90449 Nürnberg, Germany
Ph: +49-911-9679370
Fax: +49-911-96793720
Email: sales@aerotechgmbh.de
Aerotech KK
17-25 1-chome
Kitahoncho Funabashi-shi
Chiba-ken, 273-0864, Japan
Ph: +81-47-489-1741
Email: sales@aerotechkk.co.jp

Aerotech China
Unit 3328, 33/F,
China Merchants Tower,
168 - 200 Connaught Road
Central,Hong Kong
Ph: +852-3793-3488
Email: saleschina@aerotech.com

Aerotech Taiwan
1F No. 42 Lane 128
Jingye 1st Road
Taipei City
10462 Taiwan (R.O.C.)
Ph: +886-2-8502-6651
Email: wyeh@aerotech.com

Copyright © 2011, Aerotech, Inc. Information in this brochure is subject to change without notice.
Ndrive® is a registered trademark of Aerotech.
Npaq® is a registered trademark of Aerotech.

Contents
ADVANCED MECHATRONIC TECHNOLOGIES
Materials...........................................................................................................................................................................................................................4
Bearings ............................................................................................................................................................................................................................4
Magnetics .........................................................................................................................................................................................................................4
Feedback Devices............................................................................................................................................................................................................5
Electronics .........................................................................................................................................................................................................................6
Motion Controllers ...........................................................................................................................................................................................................7
Trajectory Generation .....................................................................................................................................................................................................8
Software............................................................................................................................................................................................................................8
System Test and Metrology.............................................................................................................................................................................................8
Dynamic Calibration Management System...................................................................................................................................................................8
System Checkout and Certification.................................................................................................................................................................................9

NANOPOSITIONING COMPONENTS
A Quick Look at our Nanopositioners.........................................................................................................................................................................10

Linear Stage Series
ANT95-L Direct-Drive Linear Stage (BASE and PLUS) ...............................................................................................................................................14
ANT95-XY Dual-Axis Direct-Drive Linear Stage (BASE and PLUS) ...........................................................................................................................25
ANT95-XY-ULTRA Dual-Axis Direct-Drive Linear Stage with 2D Calibration ...........................................................................................................31
ANT130-L Direct-Drive Linear Stage (BASE and PLUS).............................................................................................................................................37
ANT130-XY Dual-Axis Direct-Drive Linear Stage (BASE and PLUS) ........................................................................................................................44
ANT130-XY-ULTRA Dual-Axis Direct-Drive Linear Stage with 2D Calibration.........................................................................................................51

Rotary Stage Series
ANT95-R Direct-Drive Rotary Stage ............................................................................................................................................................................57
ANT130-R Direct-Drive Rotary Stage ..........................................................................................................................................................................62“Z” Stage Series
ANT95-L-Z Direct-Drive Vertical “Z” Stage .................................................................................................................................................................67
ANT130-L-Z Direct-Drive Vertical “Z” Stage...............................................................................................................................................................73

Vertical-Lift Stage Series
ANT95-3-V Linear Motor Wedge-Style Vertical Lift Stage ........................................................................................................................................78
ANT130-5-V Linear Motor Wedge-Style Vertical Lift Stage......................................................................................................................................83

Goniometer Series
ANT-20G Series ............................................................................................................................................................................................................88

MOTION CONTROLLERS
Nano Motion Control Systems.....................................................................................................................................................................................96
Nano Motion Control System Components................................................................................................................................................................98
Motion Composer .......................................................................................................................................................................................................100
ML Linear Amplifiers ...................................................................................................................................................................................................105
Npaq Drive Racks.......................................................................................................................................................................................................108
Epaq and Epaq MR Controllers ................................................................................................................................................................................113

ABOUT AEROTECH
Aerotech at a Glance .................................................................................................................................................................................................120
Engineered Systems ....................................................................................................................................................................................................122
Awards and Recognition............................................................................................................................................................................................123
Capabilities in Other Markets....................................................................................................................................................................................124
Aerotech Online..........................................................................................................................................................................................................126
Worldwide Training and Support .............................................................................................................................................................................127

www.aerotech.com

3Advanced Mechatronic Technologies
The Aerotech Competitive Edge – Total System Capability

Introduction

Bearing Selections

To achieve the stated goals of high performance
nanopositioning systems – long travel, high dynamic
performance, high accuracy, high resolution, and easy-to-use
software – Aerotech used its considerable experienceacquired over 40 years in the field of mechanics, magnetics,
electronics, computing, digital control systems, andelectromechanical systems engineering to develop a line ofproducts to meet the current and future requirements of thenanotechnology industries.

Length of travel, dynamics, load, and friction considerations
will all influence bearing selection. Aerotech offers four typesof bearings: flexure, anti-creep crossed roller, linear motion
guide, and air bearings.

The following review of materials, bearings, magnetics,
electronics, feedback devices, motion controllers, system andapplication software will assist potential users in the selectionof the optimum combination of components and features fortheir specific application. This knowledge, complemented by
Aerotech’s engineering staff, will make possible the selectionof the ultimate system configuration for each type of
application.

Mechanical System Consideration – Materials
Aerotech offers four types of materials with significantly
different characteristics to satisfy the requirements of aparticular application.
Aluminum: All of our aluminum stages are fabricated fromthermally stable alloy to preserve their geometrical
specification over their lifetime.
Steel: When the product is used in a less thermally stableenvironment over a long period of time, the use of steel isrecommended.
Ceramic: To further improve stage dynamic performance in athermally unstable environment, ceramic stage material isrecommended. The ceramic stage mass is similar to aluminum,
while the coefficient of expansion is slightly less than half,
providing a more stable metrology environment over a longer
period of time.
INVAR: If the cycle time is long and the thermal environment is
uncertain, the use of INVAR is recommended for both themechanics and feedback devices due to its nearly zerocoefficient of expansion.
Each of these materials can be provided with different types of
coatings. Because the selection of material and coating cansignificantly influence price and delivery, please consult your
Aerotech Application Engineer for availability and price.
4

www.aerotech.com

Flexure bearings can be used for applications where travel isless than 1 mm, and loads are light (<<1 kg). Flexure bearings
provide highly repeatable, nearly hysteresis-free motion.
Crossed-roller bearings are used in stage designs that requireprecise motion and minimal disturbance from the bearing.
They offer a compact footprint for short travels. Payloads are
typically 0.5 kg to 50 kg. Practical travels are from 25 mm to
400 mm. Stage length and bearing cantilevering limit
performance in longer travels. When coupled with an
optimized motion system, these stages are capable ofnanometer-level precision.
Stage designs that use linear motion guides range in travelfrom 25 mm to >3 m. Payloads vary from 2 kg to >1000 kg.
Applications are usually point-to-point motion or contouring,where contouring dynamics are 0.25 μm to 1.0 μm. Linear
motion guides are limited to 5-10 g acceleration and 5 m/svelocity.
Air-bearing stages provide nearly frictionless motion. Bearing
geometric performance is superior to other bearing types.
Practical travels are 25 mm to >3 m, with payloads ranging
from 1 kg to 250 kg. Bearing surfaces are relatively large
compared to other bearing types, and stage size iscomparatively large. Maximum speed is not limited by thebearing. The frictionless nature of these bearings enables thehighest levels of accuracy and dynamic performance whencompared to stage systems that use mechanical elements.

Magnetics
To allow for high performance over long travels, Aerotech
employs a noncontact, direct-drive motor technology.
Aerotech’s motor and magnetic design are optimized tominimize force ripple, maximize force, and minimize motor
heating. Aerotech motors have higher power density thancompeting models. In addition, Aerotech’s ability to customize
motors to fit the stage allows for additional flexibility in thedesign.

Advanced Mechatronic Technologies
The Aerotech Competitive Edge – Optimum Feedback Technology

DeviceResolution

Thermal Stability

Travel

<1 nm

High

Unlimited

Laser Interferometer

<1 nm

High

0 mm-2000 mm

Capacitance Probe

<1 nm

High

<1 mm

(1)

LVDT

>1 nm

Medium0 mm-10 mm

Strain Gage(1)>1 nmMedium<1 mm

Encoder(1)

Notes:
1. As the travel increases, so does the resolution and minimum step size.

Figure 3. An example of a capacitance position sensor.
Figure 1. An example of a linear encoder in use.

Feedback Devices
Aerotech offers a variety of feedback devices with its
positioning systems. These include linear encoder, laserinterferometer, capacitance probe, LVDT, and strain gage.
The particular device chosen depends on the product and theapplication.
Linear encoder: Linear encoders employ a scale with agrating period and a read head (see Figure 1). The readhead measures the gratings and generates an analog signal
whose period is the same as the grating on the scale. Typicalperiods range from 200 nm to 20 μm. The output of the readhead is either analog (1 volt peak-to-peak) or digital. Analog
output is usually chosen as it gives the ability to have very

Figure 2. An example of a laser interferometer in use.

high resolution systems without sacrificing speed. In addition,
various techniques are employed by Aerotech controllers to
optimize the resolution and allow for exceptional in-position
stability. Linear encoders are suitable for any travel.
Laser Interferometer: A laser interferometer feedback system
requires a laser, optics, and processing unit (see Figure 2). A
key advantage of the laser interferometer over other feedback
devices is that it allows for measurement at the work point, as
compared to other feedback devices that are usually mounted
near the bearings. Work-point measurements greatly reduce
the effects of Abbé offset errors. Laser interferometers areoften used with environmental stations that allow forcompensation due to external effects. However, they are
expensive and require a clear beam path to the moving
target. Laser interferometers are suitable for travels from 0 mm
to 2000 mm.
Capacitance Probe: The capacitance probe is a type of
dielectric sensor that uses capacitance to measure distance(see Figure 3). As the plates move closer to or further apart,the amount of charge accumulated on the plates changes. By
measuring this charge, the relative change in distance
between the two plates can be measured. While the probe
itself is not too complex, the electronics required todisseminate the analog signal can be highly complex. Also,
due to the low signal level, feedback signals from
capacitance probes are more susceptible to electrical noise.
Capacitance probe travel is typically limited to less than 1 mm
in high-performance motion systems.

www.aerotech.com

5Advanced Mechatronic Technologies
The Aerotech Competitive Edge – Advanced Drive Components

Figure 4. An example of an LVDT position sensor.

LVDT: An LVDT is a linear variable differential transformer (seeFigure 4). As the magnetic core moves relative to the fixed
windings, an output voltage is generated that is a function of
the displacement. Advantages of these devices are small sizeand lower cost. They are typically used where travel is limited(<1 mm) and resolution requirements are on the order of 10’sof nanometers.
Strain Gage: The strain gage measures displacement bymeasuring the resistance change as the device (strain gage)deforms. The output signal is sampled by an A/D converterand converted to a displacement. To minimize thermal effects,
a Wheatstone bridge is often connected to the unit undermeasurement. These devices are popular in short travel stages(<1 mm) due to the small size and low cost.

Electronics
It is difficult to connect components from different suppliers
and achieve the required specifications for high-performancesystems. Aerotech understands the interaction between thevarious elements and designs control electronics to achieve
the desired results.
When operating at the nanometer level, any disturbance on
the system can lead to position errors. These disturbances canbe external (ground floor, structural) or internal (noise on
feedback signals, poor power electronics). Aerotech goes togreat lengths to minimize self-induced electrical noise when
designing the electronics. At a minimum the power amplifiersof the drive must be linear rather than the more common
PWM (Pulse Width Modulated) amplifiers.
Compare the waveforms from PWM and linear amplifiers
shown in Figures 5 and 6. Figure 5 shows an example of a
PWM voltage and subsequent current for a sine wave. As canbe seen from the figure, the voltage to the motor is a squarewave. While inductance will filter this square wave, the6www.aerotech.com

Figure 5. Output voltage and current from a PWM amplifier.

Figure 6. Output voltage and current from a linear amplifier.

resulting current will still contain a high-frequency component
known as ripple current. When controlling systems withresolutions greater than 50 nm, the effect of this ripple current
is negligible. When controlling systems with resolutions lessthan 50 nm, and more specifically, at resolutions less than 5
nm, the ripple can cause disturbances in the system. The end
result is poor in-position stability.
Figure 6 shows the output voltage and current from a linear
amplifier. As can be seen from this plot, the voltage andcurrent waveform have no ripple current. Ultimately, this willlead to better in-position stability.
Linear amplifiers are not without their own inherent
drawbacks. Due to their inefficiency, linear amplifiers arelarge and generate a significant amount of heat. Due to thetransistor topology they can suffer from cross-over distortion.
Cross-over distortion occurs when the current/voltage movethrough 0. Instead of the voltage/current having a smoothtransition, a discontinuity occurs that can cause problems forthe servo loop as it tries to hold the stage in position.

Advanced Mechatronic Technologies
The Aerotech Competitive Edge – Superior Software

Figure 7. Cross-over instability in a linear amplifier.

Assuming no external disturbance on the system, the amountof force, and hence current, needed to hold position will be
low. This means that the current will be in the cross-overdistortion zone which makes it difficult for the servo system tomaintain stability. Figure 7 shows this situation. Many currently
available linear power amplifiers have this problem, but
Aerotech has eliminated cross-over instability in our linear
amplifiers, as can be seen from Figure 8.
Aerotech electronics support the different feedback devices
mentioned. Because all of these feedback devices are
inherently analog, there is some amount of noise on thesignals. Of great importance is the ability of the control
electronics to remove the unwanted noise and operate on thetrue signal. Aerotech has spent significant R&D on thedevelopment of electronics to optimize the data from thefeedback devices.

Motion Controllers
The Aerotech controller family offers high performance andflexibility that is easy to set up and use. Applications requiring
coordinated motion (up to 32 axes) for both nano stages andother support axes, as well as single-axis nano motion
controllers, are easily satisfied. The software-based A3200
combines PC technologies with the latest in real-time motion
control for easy integration of other applications such as
vision, data processing, and custom HMIs. Aerotech’s standalone platforms, Ensemble and Soloist, offer the same highperformance motion and tools without requiring a Windows®
PC. All of the controllers will run brushless, brush, voice coil, or
stepper motors as well as using both PWM and/or linear
drive technology. For the A3200 controller, the processing
power is distributed across each of the axis controllers and thePC with a serial motion bus to minimize cable management

Figure 8. Aerotech linear amplifiers eliminate cross-over instability.

design and cost while providing consistent synchronization ofeach axis regardless of axis count. This distributed architecture
also allows each axis to be optimally configured for drive
technology, bus voltage, current, multiplier hardware, encoder
technology, and I/O required – all configured throughcalculators for easy setup.
In addition to the 30-plus standard control features requiredby high-performance controllers, each of the controllers has
advanced controller algorithms and hardware that minimize
disturbance errors, increase tracking capabilities, and provide
superior in-position stability. For instance, Harmonic
Cancellation will learn the magnitude and frequency ofrepetitive motions and minimize the tracking error caused by
the disturbances. Iterative Learning Control can be used to
optimize repeating move sequences. The Enhanced
Throughput Module (ETM) will increase machine throughput
by measuring base motion and appropriately combining thiswith the servo loop. State-based Gain Scheduling and/or
Friction Compensation can be used to increase servo
performance with complex mechanical systems that changewith load orientation. Position Synchronized Output (PSO)
can trigger outputs based on the actual calibrated encoder
position of 1, 2, or 3 axes during motion, even while
accelerating, which increases machine throughput. Multi-axis
firing with 200 ns latency at a rate of up to 10 MHz means
more accurate measurements or processing of the associatedlaser, camera, and data acquisition. This advanced controls
toolkit in conjunction with the other advanced Aerotech
technologies can be combined to achieve true nanomotion,
one nanometer at a time.

www.aerotech.com

7Advanced Mechatronic Technologies
The Aerotech Competitive Edge –Advanced Trajectory Management & Metrology
Trajectory Generation
Aerotech’s trajectory generator distributes the computation
across the axes yielding more time for user programs to
execute. The position, velocity, and acceleration arecalculated and streamed to the axis controller every 125 μs.
Each new trajectory can be velocity blended or set a new
endpoint for the motion. At the lowest level of trajectory
generation a seven segment acceleration profile can be
employed to precisely control the acceleration/decelerationof each move, even asymmetrically if necessary. Advanced
trajectory commands, such as the slice command, increase themachine throughput and ease programming by optimallyblending a step and scan into a single contoured move.
Traditional soft-limits and safe zones are adhered to by thegenerator.
For users that prefer graphical programming, Aerotech’s
Motion Designer can be used to build any trajectory frombasic building blocks – trapezoidal, sinusoidal, triangle, etc. –or just import actual data. Motion Designer will calculate themissing state information, filters can be added to smoothnoise, and a program will be auto-generated and compiledthat will run on any Aerotech controller.

time series analysis (autotuning, min, max, rms) and frequency
analysis (FFT, loop transmissions, bode plots) make setup
easy. For instance, adding up to eight filters can be done by
dragging the gain curve on a bode plot to the desired
response. The filters will be automatically calculated andloaded into memory to achieve the goal. The integrated tools
enable achieving optimal high performance nanomotion fastand easy.

System Test and Metrology Capabilities
In order to achieve, measure, and certify the statedspecification of the selected system, Aerotech made large
investments over the years in its metrology and cleanroom
capabilities. Our cleanroom not only meets the requirementsof large system ISO 14644-1 Class 6 (Federal Standard
209E Class 1000) and cell specific ISO Class 5 (Class 100)
capabilities, but also contains seismically isolated test areasthat are temperature controlled to better than 0.25°C. Whensystem test specifications do not require cleanroom capability,
our other metrology laboratories (seehttp://www.aerotech.com/clroom.html) are utilized. Theselaboratories also have the capabilities to meet theenvironmental metrology requirements of nanotechnology andbeyond.

Software
Aerotech’s Motion Composer Suite for the Aerotech A3200,
Ensemble, and Soloist controllers focuses on ease-of-use forthe user. Many of the common configurations are set up
through calculators. The programmer will shorten
development times compared with other controllers due to theIntegrated Development Environment (IDE) that includes all of
the standard and advanced tools for setup and debug.
Additionally, Aerotech provides the flexibility to use the tools
or controller most familiar to programmers. Complementing
the IDE is a comprehensive .NET motion library that provides
classes for motion, I/O, status, and diagnostic information. A
programmer can program in Visual Studio and use the .NET
library, or use the Motion Composer (IDE) to develop codewith English style commands or G-code. A LabVIEW® .vi
library is available for NI users. And for those using VB6,
C++, or C, a complete C library and ASCII interface isavailable. The Motion Composer Suite includes the Motion
Composer IDE, Digital Scope with many tools for time andfrequency analysis, Configuration Manager for parameterand fault setting, Status Utility, and Operator’s Interface. The
Digital Scope collects and displays any signal in thecontroller. This provides users the tools to examine motion,
inputs, and outputs of the process to optimize motion. Tools for8

www.aerotech.com

To complement this large investment in our facilities, Aerotech
also invested heavily in the required test equipment. State-ofthe-art interferometers from Agilent, Renishaw and Zygo,
phase measuring interferometers, capacitive position sensors,and LVDT transducers are used to verify, calibrate, and tune
all of our linear systems.
For angular and geometrical measurement of rotaryequipment, Moeller Wedel auto collimators combined with
our Advanced Rotary Test Measurement System verify
accuracy, resolution, axial and radial error motion and tilt
error motion. This primary test system is supplemented by ahost of other instrumentation: phase measuring interferometers,
capacitance gages, LVDT transducers, optical flats, etc.

Dynamic Calibration Management System
In order to achieve the highest possible system accuracy fromour multi-axis nanopositioning systems, Aerotech hasdeveloped an industry-leading advanced, interactive,
dynamic trajectory management system. To take advantage ofthis sophisticated interactive calibration system, themechanical system has to be completely assembled andfunctionally tested prior to calibration in our best-in-classFigure 9. Rotary stage error motion before calibration.

metrology labs. Nano-level system accuracy can only beachieved under stringent environmental conditions, calibratingwith the best test equipment and utilizing the formidable
capability of Aerotech’s Dynamic Calibration Management
System.
An example can be seen in Figure 9 and 10. Figure 9 showsthe error motion of a rotary stage mounted to an XY linear
stage. Figure 10 shows the error motion after calibration. The
synchronous error reduced by over 2 μm.

Figure 10. Rotary stage error motion after calibration.

System Checkout and Certification
Each system component is extensively tested and exercised
prior to final system checkout. During final system checkout,each system is optimized per the customer’s requirements. The
results of the testing and critical parameters are recorded,
preserved, and shipped with the system. This data, and how it
was obtained, is of utmost importance and serves as theCertification of Compliance. Aerotech will not permit any
system to leave the premises unless it meets the statedspecifications.

We invite you to visit us and witness our test and calibration
procedures.

www.aerotech.com

9A Quick Look at our Nanopositioners
Linear • Rotary • Vertical Lift and Z • Goniometer
ANT95-L Single-Axis
Linear Stage
Large travel
Noncontact, non-cogging, frictionlessdirect-drive – zero backlash or
hysteresis
High resolution (1 nm) andaccuracy (250 nm)
In-position stability of <1 nm
ANT95-50-L-PLUS 1 nm step plot

Anti-creep crossed-roller bearings
High dynamic performance
Available in X, XY, XYZ, and manyother combinations

The ANT95-L series offers
25, 50, 75, or 100 mm travel.

ANT95-XY Dual-Axis Linear Stage
Large travel
Integrated low profile XY linear motor stage
Noncontact, non-cogging, frictionlessdirect-drive – zero backlash or hysteresis
High resolution (1 nm) andaccuracy (250 nm)

ANT95-XY PLUS 2D accuracy

In-position stability of <1 nm
Anti-creep
crossed-roller bearings
High dynamic performance

The ANT95-XY series offers 25 x 25 mm or 50 x 50 mm travel.

10

www.aerotech.com

ANT130-L Single-Axis
Linear StageThe ANT130-L series offers
35, 60, 110, or 160 mm travel.

Large travel
Noncontact, non-cogging, frictionless direct-drive– zero backlash or hysteresis
High resolution (1 nm) and accuracy (250 nm)
Anti-creep crossed-roller bearings
High dynamic performance
Large selection – 4 different travel options
11
10
9

ANT130-XY Dual-Axis Linear Stage
Large travel
Integrated, low profile,
XY linear-motor stage

Position (nm)

8
7
6
5
4
3
2
1
0
1
0

Noncontact, non-cogging, frictionlessdirect-drive – zero backlash or hysteresis

5

10

15
20
Time (s)25

30

ANT130-060-L-PLUS 1 nm step plot

High resolution (1 nm) and accuracy (250 nm)
Anti-creep crossed-roller bearings
High dynamic performance

ANT130-XY PLUS 2D accuracy

The ANT130-XY series offers 60 x 60,
110 x 110, or 160 x 160 mm travel.

www.aerotech.com

11

A Quick Look at our Nanopositioners

High resolution (0.01 arc sec)
High performance;
unlimited rotation

The ANT95-R series offers
unlimited rotation.

Outstanding error
motion specifications

Position (μrad)

ANT95-R and ANT130-R
Rotary Stages

0.53
0.48

0.11
0.1

0.44

0.09

0.39
0.34

0.08
0.07

0.29

0.06

0.24

0.05

0.19

0.04

0.15
0.1

0.03
0.02

0.05

0.01

0

0

0.05

0.01
0

0.005 arc-second in-position
stability

5

10
15Time (sec)20

25

ANT95-R-PLUS 0.01 arc-sec step plot

3 arc-second accuracy
1.5 arc-second bi-directional
repeatability
Multi-axis configurations

ANT-20G-90 0.25 µrad or 0.05 arc sec step size

0.45

2.0

0.4

1.75

0.35

1.5

0.3

1.25

0.25

1.0

0.2

0.75

0.15

0.5

0.1

0.25

0.05

0

0

-0.25

Position (arc sec)

Position (µrad)

2.25

The ANT130-R series offers
unlimited rotation.

ANT-20G
Goniometers

-0.05
0

5

10

15
Time (s)ANT-20G-90 0.05 arc-sec step plot

20

25

Noncontact, non-cogging,
frictionless direct-drive forzero backlash or hysteresis
High speed (150°/s)
High resolution (0.05 arc second)
Excellent in-position stability
Large rotation angle – 20°
Orthogonal mountingof two cradles provides
rotation about the same point

The ANT-20G series offers a
20° rotation angle.

12

www.aerotech.com

Position (arc sec)

Linear • Rotary • Vertical Lift and Z • GoniometerNo maintenance
Compact design

ANT95-L-Z and
ANT130-L-Z

22
20
18
Position (nm)16

Nanometer performancein a large travel format
High resolution (2 nm) andaccuracy (300 nm)

14
12
10
8
6
4
2
0

In-position stability of <2 nm

2
0

5

10

Anti-creep crossed-roller bearings

15
20
Time (s)25

30

ANT95-50-L-Z-PLUS 2 nm step plot

High dynamic performance

ANT130-L-Z series offers
35 or 60 mm travel.

11
10
9
8
Position (nm)7
6
5The ANT95-L-Z series offers
25 or 50 mm travel.

4
3
2
1

ANT95-3-V and
ANT130-5-V

0
1
0

5

10

15
20
Time (s)25

30

ANT95-3-V-PLUS 1 nm step plot

Nanometer performancein a large travel format
The ANT95-3-V series
offers 3 mm travel.

In-position stability of <1 nm
3 or 5 mm travel
200 nm accuracy
Anti-creep crossed-roller
bearings
High dynamic performance

The ANT130-5-V series
offers 5 mm travel.

www.aerotech.com

13NANO Technology
ANT95-L Series

ANT95-L Seriesnano Motion Technology

Mechanical-Bearing
Linear Motor Stage
Nanometer-level performance in a large
travel format
High resolution (1 nm), repeatability(75 nm), and accuracy (250 nm)
In-position stability of <1 nm
Anti-creep crossed-roller bearings
High dynamic performance

Introduction

Flexible System Design

Aerotech’s ANT95 series stages are the world’s first
nanometer-level positioning systems with greater than 25 mmtravel. The ANT95-L and ANT95-L-PLUS crossed-roller stages
are the best-in-class in combining speed, accuracy, resolution,
repeatability, reliability, and size, and are offered in two
accuracy grades. As an evolution of the ANT stage family,
these linear stages exhibit enhanced motion performance overAerotech’s first generation ANT series. Product improvements
such as 5 g acceleration, 500 mm/s velocity, enhanced load
capacity, and standardized, universal base mounting patterns
allow the use of this flexible stage family in an even wider
range of configurations than its predecessors.

The ANT95-L family has universal mounting and tabletop
patterns that allow for easy system integration. Two, three, ormore axes can be easily combined for flexible system designs
and multi-axis configurations.

System Characteristics
Outstanding accuracy, position repeatability, and in-position
stability require high system resolution. The ANT95-L stage’s
industry-leading 1 nm minimum incremental step size provides
this high level of performance. Aerotech’s direct-drive
technology has no hysteresis or backlash, enabling accurate
and repeatable nanometer-scale motion.

Noncontact Direct-Drive

14

www.aerotech.com

11
10
9
8
Position (nm)All of the original ANT series’ direct-drive advantages havebeen preserved in the ANT95-L family. Only noncontact
direct-drive technology offers the robust, accurate, and highspeed positioning necessary for mass production of precision
devices. ANT95-L stages utilize advanced direct-drive
technology pioneered by Aerotech to achieve the highest
level of positioning performance. This direct-drive technology
is high-performance, non-cogging, noncontact, high-speed,
high-resolution, and high-accuracy. This unique drive andbearing combination, packaged in an extremely small-profileand footprint, offers tangible advantages in many applications
such as high-precision positioning, disk-drive fabrication, fiberalignment, optical delay element actuation, sensor testing, andscanning processes that demand smooth and precise motion.

7
6
5
4
3
2
1
0
1
0

5

10

15
20
Time (s)25

30

ANT95-50-L-PLUS 1 nm step plot. Best-in-class resolution andexceptional in-position stability for large travel stages.

Mechanical Specifications
TravelAccuracy(1)ANT95-25-L

ANT95-25-L-PLUS

ANT95-50-L

25 mm

25 mm

50 mm

ANT95-50-L-PLUS
50 mm±2.5 µm (±100 µin)±250 nm (±10 µin)±2.5 µm (±100 µin)±250 nm (±10 µin)

Resolution

1 nm (0.04 µin)

1 nm (0.04 µin)

1 nm (0.04 µin)

1 nm (0.04 µin)

Repeatability (Bi-Directional)(1)±100 nm (±4 µin)

±75 nm (±3 µin)±100 nm (±4 µin)

±75 nm (±3 µin)

±25 nm (±1 µin)

±25 nm (±1 µin)

±25 nm (±1 µin)

±25 nm (±1 µin)

Straightness(1)±1.0 µm (±40 µin)±1.0 µm (±40 µin)±1.0 µm (±40 µin)±1.0 µm (±40 µin)

Flatness(1)±1.0 µm (±40 µin)±1.0 µm (±40 µin)±1.0 µm (±40 µin)±1.0 µm (±40 µin)

Pitch

10 arc sec

10 arc sec

10 arc sec

10 arc sec

Roll

10 arc sec

10 arc sec

10 arc sec

10 arc sec

Yaw
Maximum Speed
Maximum Acceleration

5 arc sec

5 arc sec

5 arc sec

5 arc sec

500 mm/s (20 in/s)

500 mm/s (20 in/s)

500 mm/s (20 in/s)

500 mm/s (20 in/s)

5 g - 50 m/s2 (No Load)

5 g - 50 m/s2 (No Load)

4 g - 40 m/s2 (No Load)

4 g - 40 m/s2 (No Load)See graph for typical performance

Speed Stability

See graph for typical performance

Settling Time
In-Position Stability(2)Maximum Force (Continuous)
Load Capacity(3)ANT95-L Series

Repeatability (Uni-Directional)

NANO Technology

ANT95-L Series SPECIFICATIONS

Horizontal<1 nm (<0.04 µin)

<1 nm (<0.04 µin)

<1 nm (<0.04 µin)7.75 N

7.75 N

9.5 N<1 nm (<0.04 µin)
9.5 N

5.0 kg (11 lb)

5.0 kg (11 lb)

7.0 kg (15.4 lb)

7.0 kg (15.4 lb)

5.0 kg (11 lb)

5.0 kg (11 lb)

5.0 kg (11 lb)

5.0 kg (11 lb)

Moving Mass

0.46 kg (1.0 lb)

0.46 kg (1.0 lb)

0.52 kg (1.1 lb)

0.52 kg (1.1 lb)

Stage Mass

0.8 kg (1.8 lb)

0.8 kg (1.8 lb)

1.2 kg (2.7 lb)

1.2 kg (2.7 lb)

SideAluminum Body/Black Hardcoat Finish

Material

30,000 Hours

MTBF (Mean Time Between Failure)

Notes:
1. Certified with each stage.
2. In-Position Jitter listing is 3 sigma value.
3. Axis orientation for on-axis loading is listed.
• Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of combined multi-axis systems is payload and workpoint dependent. Consult factory for
multi-axis or non-standard applications.
• -PLUS requires the use of an Aerotech controller.

Mechanical Specifications
TravelAccuracy(1)ANT95-75-L

ANT95-75-L-PLUS

ANT95-100-L

75 mm

75 mm

100 mmANT95-100-L-PLUS
100 mm

±4.0 µm (±160 µin)±275 nm (±11 µin)±5.0 µm (±200 µin)±275 nm (±11 µin)

Resolution

1 nm (0.04 µin)

1 nm (0.04 µin)

1 nm (0.04 µin)

1 nm (0.04 µin)

Repeatability (Bi-Directional)(1)±100 nm (±4 µin)

±75 nm (±3 µin)±100 nm (±4 µin)

±75 nm (±3 µin)

Repeatability (Uni-Directional)±25 nm (±1 µin)

±25 nm (±1 µin)

±25 nm (±1 µin)

±25 nm (±1 µin)

Straightness(1)±2.0 µm (±80 µin)±2.0 µm (±80 µin)±2.5 µm (±100 µin)±2.5 µm (±100 µin)

Flatness(1)±2.0 µm (±80 µin)±2.0 µm (±80 µin)±2.5 µm (±100 µin)±2.5 µm (±100 µin)

Pitch

10 arc sec

10 arc sec

10 arc sec

10 arc sec

Roll

10 arc sec

10 arc sec

10 arc sec

10 arc sec

Yaw

5 arc sec

5 arc sec

5 arc sec

5 arc sec

500 mm/s (20 in/s)

500 mm/s (20 in/s)

500 mm/s (20 in/s)

500 mm/s (20 in/s)

3 g - 30 m/s2 (No Load)

3 g - 30 m/s2 (No Load)

3 g - 30 m/s2 (No Load)

3 g - 30 m/s2 (No Load)

Maximum Speed
Maximum Acceleration

See graph for typical performance

Speed Stability

See graph for typical performance

Settling Time
In-Position Stability(2)Maximum Force (Continuous)
Horizontal
Load Capacity(3)<1 nm (<0.04 µin)

<1 nm (<0.04 µin)

<1 nm (<0.04 µin)

9.5 N

9.5 N

12.9 N<1 nm (<0.04 µin)12.9 N

7.0 kg (15.4 lb)

7.0 kg (15.4 lb)

7.0 kg (15.4 lb)

7.0 kg (15.4 lb)

5.0 kg (11 lb)

5.0 kg (11 lb)

5.0 kg (11 lb)

5.0 kg (11 lb)

Moving Mass

0.72 kg (1.6 lb)

0.72 kg (1.6 lb)

0.91 kg (2.0 lb)

0.91 kg (2.0 lb)

Stage Mass

1.64 kg (3.6 lb)

1.64 kg (3.6 lb)

2.1 kg (4.6 lb)

2.1 kg (4.6 lb)

Side

Material
MTBF (Mean Time Between Failure)

Aluminum Body/Black Hardcoat Finish
30,000 Hours

Notes:
1. Certified with each stage.
2. In-Position Jitter listing is 3 sigma value.
3. Axis orientation for on-axis loading is listed.
• Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of combined multi-axis systems is payload and workpoint dependent. Consult factory for
multi-axis or non-standard applications.
• -PLUS requires the use of an Aerotech controller.

www.aerotech.com

15NANO Technology
ANT95-L Series

ANT95-L Series SPECIFICATIONSElectrical Specifications

ANT95-25-L

ANT95-25-L-PLUS

ANT95-50-L

Drive System

Brushless Linear Servomotor

Feedback

Noncontact Linear Encoder±40 VDC

Maximum Bus Voltage
Limit Switches

5 V, Normally Closed

Home Switch

Near Center

Electrical Specifications

ANT95-75-L

ANT95-75-L-PLUS

ANT95-100-L

Drive System

Brushless Linear Servomotor

Feedback

Noncontact Linear Encoder

ANT95-100-L-PLUS±40 VDC

Maximum Bus Voltage
Limit Switches

5 V, Normally Closed

Home Switch

Near Center

Recommended Controller

ANT95-25-L

ANT95-25-L-PLUS

ANT95-50-L

A3200

Npaq-MXR
Npaq MR-MXH
Ndrive ML-MXH

Ensemble

Epaq-MXH
Epaq MR-MXH
Ensemble ML-MXH

Soloist

Soloist ML-MXH

Multi-Axis

Single Axis

ANT95-50-L-PLUS

ANT95-50-L-PLUS

Notes:
1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Recommended Controller

ANT95-75-L

ANT95-75-L-PLUS

A3200

Npaq-MXR
Npaq MR-MXH
Ndrive ML-MXH

Ensemble

Epaq-MXH
Epaq MR-MXH
Ensemble ML-MXH

Soloist

Soloist ML-MXH

Multi-Axis

Single Axis

ANT95-100-L

ANT95-100-L-PLUS

Notes:
1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within
0.25ºC/24 hours. If this is not possible, alternate products are available. Please consult Aerotech Application Engineering for more information.

16

www.aerotech.com

80

100.1560
Position Error (nm)

100

100.2

100.1
100.05
100
99.95
99.9
99.85

← 178 ms Move and Settle

20
0
20
40
60
80

99.75
20

100
15

10

5
0
5
Position (mm)

10

15

20

0

1000

400

750
Straightness Error (nm)

200
100
0
100
200
300

100

200

300 400 500 600
Move Time (ms)

700

800

ANT95-50-L-PLUS step and settle performance at full travel and 1
kg payload. Outstanding settling time enhances throughput of mostapplications.

500

300
Position Error (nm)

40

99.8

ANT95-50-L-PLUS velocity performance at 100 mm/s and 1 kg
payload. Excellent speed stability is another feature of the ANT
series stages.

500
250
0
250
500
750

400
500

1000
10

5

0
Position (mm)510

ANT95-25-L-PLUS accuracy and repeatability. This multiple test
run over an extended period of time shows the high level of systemaccuracy and repeatability.

7
6
5
4
3
2
1
0
1
2
3
4
5
6
7

10

20

10

0
Position (mm)1020

ANT95-50-L-PLUS yaw, five runs, bi-directional. Highly
repeatable, minimal yaw error enhances system positioning
accuracy.

50Position (mm)510

ANT95-25-L-PLUS straightness error, five runs, bi-directional.
Exceptional and highly repeatable – five times more accurate than
the stated specification.

Pitch (arc sec)

Yaw (arc sec)

Step Size: 50 mm
Speed: 500 mm/s
Settle Spec: ±20 nm

ANT95-L Series

Velocity (mm/s)

100.25NANO Technology

ANT95-L/ANT95-L-PLUS Series PERFORMANCE

7
6
5
4
3
2
1
0
1
2
3
4
5
6
7
20

10

0
Position (mm)1020

ANT95-50-L-PLUS pitch, five runs, bi-directional. Excellent
repeatability/accuracy contribute to improved processing.

www.aerotech.com

17NANO Technology
ANT95-L Series

ANT95-25-L/ANT95-25-L-PLUS DIMENSIONS
ANT95-25-L/ANT95-25-L-PLUS
DOWEL PIN MOUNTING
2X
4.0
4.0

37.5
TYP
102.3
25.0
TYP
50.0

UNDERSIDE DOWELPIN MOUNTING
4.0
7.0

CUSTOMER MOUNTING
13X M4x0.7
4.0 [.16]

25.0 TYP
37.5 TYP
47.0
94.0

14.0
1/2 HARD STOPTRAVEL

100.0

13.0
1/2 LIMITTRAVEL

12.5
1/2 NOMINALTRAVEL

33.0

14.0
1/2 HARD STOPTRAVELTYP 2.5

10.0
22.5

50.0
75.0
95.0

18

www.aerotech.com

25.0
12.5
STAGE MOUNTING
4X
4.50 THRU(CLEARANCE FOR M4 SHCS)DIMENSIONS: MILLIMETERS

50.0
75.0
115.0

STAGE MOUNTING
10.0
4X M6x1.0

NANO Technology

ANT95-50-L/ANT95-50-L-PLUS DIMENSIONS
ANT95-50-L/ANT95-50-L-PLUS

DOWEL PIN MOUNTING
4.0
4.0
2X

ANT95-L Series

4.0

7.0

25.0 TYP
144.1
TYP
37.5

TYP
50.0

TYP
62.5 70.9

CUSTOMER MOUNTING
5.0
23X M4x0.7

TYP 25.0
TYP 37.5

28.0
1/2 HARD STOPTRAVEL

47.0

28.0
1/2 HARD STOPTRAVEL
141.8

25.0
1/2 NOMINALTRAVEL

94.0

33.0

26.0
1/2 LIMITTRAVELTYP 2.5

10.0
22.5

50.0

20.9

100.0

STAGE MOUNTING
4X M6x1.0
10.0

75.0
95.0

STAGE MOUNTING
4X
4.50 THRU(CLEARANCE FOR M4 SHCS)

156.8
DIMENSIONS: MILLIMETERS

www.aerotech.com

19NANO Technology
ANT95-L Series

ANT95-75-L/ANT95-75-L-PLUS DIMENSIONS
ANT95-75-L/ANT95-75-L-PLUS
50
25
47.5
CUSTOMER MOUNTING
27x M4x0.7
5.0

62.5

50

25PIN MOTOR / FEEDBACK CONNECTORHEIGHT = 26MM

37.5

25

12.5
2X

12.5

25

37.5

50

62.5

40

82.5
~875
CABLE
LENGTH

37.5
75

68

146
40.5
1/2 HARDSTOPTRAVELDOWEL PIN MOUNTING
2X 4.0
4.0

165
37.5
1/2 NORMALTRAVEL94

38.5
1/2 LIMITTRAVEL

2.5
TYP

33

22.5
TYP

50

10
TYP

75
95

20

54

5.8 THRU ALL

www.aerotech.com

STAGE MOUNTING
4x M6x1.0
10

45
TYP

20
STAGE MOUNTING
TYP
4x 4.50 THRU
[CLEARANCE FOR M4 SHCS]DIMENSIONS: MILLIMETERS

75
125
205.5

40.5

NANO Technology

ANT95-100-L/ANT95-100-L-PLUS DIMENSIONS
ANT95-100-L/ANT95-100-L-PLUS
50
25
47.5

ANT95-L Series

CUSTOMER MOUNTING
5.0
27x M4x0.7

62.5

50

25PIN MOTOR / FEEDBACK CONNECTORHEIGHT = 26MM

37.5

25

12.5
12.5

2X

54

5.8 THRU ALL

25

37.5

50

62.5

40

105
~840
CABLE
LENGTH

37.5
75

68

146

53
1/2 HARDSTOPTRAVELDOWEL PIN MOUNTING
2X
4.0
4.0
210
50
1/2 NORMALTRAVEL

94

51
1/2 LIMITTRAVEL

2.5
TYP

33

22.5
TYP

50

10
TYP

75
95

STAGE MOUNTING
8x M6x1.0
10STAGE MOUNTING
4x 4.50 THRU
[CLEARANCE FOR M4 SHCS]

67.5
TYP
42.5
TYP
17.5
TYP

DIMENSIONS: MILLIMETERS

75
125

53

175
263

www.aerotech.com

21

ANT95-25-L
ANT95-25-L-PLUS

STAGE MOUNTING
4X M4x0.7 THRU

50.0
22.5

25.0

ANT95-L Series

NANO Technology

ANT95-25-L/ANT95-50-L and ANT95-25-L-PLUS/ANT95-50-L-PLUS Mounting Plate DIMENSIONS

50.8
2.00

50.0

75.0

100.0

24.6
12.5
10.0

22.1
50.8
2.00

BREADBOARD MOUNTING PATTERN
4X M6 OR 1/4-20 BOLT C'BORE SLOT

95.0

ANT95-50-L
ANT95-50-L-PLUS

75.0
50.0

125.0

100.0

76.2
3.00

95.0

www.aerotech.com

STAGE MOUNTING
8X M4x0.7 THRU

75.0

50.8
2.00

22

DIMENSIONS: MILLIMETERS

7.0
C'BORE
DEPTH

100.0

141.8

BREADBOARD MOUNTING
4X M6 OR 1/4-20 BOLTC'BORE SLOT

10.0

DIMENSIONS: MILLIMETERSANT95-75-L
ANT95-75-L-PLUS

22.1
.87

STAGE MOUNTING
4x M4x0.7 THRU

50.8
2.00

57.5
57.1
2.2

32.5

50.8
2.0

50

31.7
1.2

50

22.1
.87

79.6
3.1

50.8
2.00

BREADBOARD MOUNTING PATTERN
8x M6 OR 1/4-20 SHCS C'BORE SLOTS

28.8
1.13

10

DIMENSIONS: MILLIMETERS

STAGE MOUNTING
4x M4x0.7 THRU
80
55

54.2
2.13

152.4
6.00

165

125

20

22.5

95

ANT95-100-L
ANT95-100-L-PLUS

100

ANT95-L Series

101.6
4.0

NANO Technology

ANT95-75-L/ANT95-100-L and ANT95-75-L-PLUS/ANT95-100-L-PLUS Mounting Plate DIMENSIONS

101.6
4.0

50.8
2.0

50

22.5

50
95

100

125

210

150

30

10

42.5
BREADBOARD MOUNTING PATTERN
8x M6 OR 1/4-20 SHCS C'BORE SLOTSDIMENSIONS: MILLIMETERS

www.aerotech.com

23NANO Technology
ANT95-L Series

ANT95-L Series ORDERING INFORMATION
ANT95-L Series Linear Stage
ANT95-L/ANT95-L-PLUS Aerotech nanotranslation crossed-roller linear positioner
Linear Stage Travel
ANT95-25-L
25 mm (1 in) travel stage with proprietary direct-drive motor technology,
1 Vp-p sinusoidal output linear encoder and limits
ANT95-25-L-PLUS
25 mm (1 in) travel stage with proprietary direct-drive motor technology,
1 Vp-p sinusoidal output linear encoder and limits (High Accuracy Version)
50 mm (2 in) travel stage with proprietary direct-drive motor technology,
ANT95-50-L
1 Vp-p sinusoidal output linear encoder and limits
ANT95-50-L-PLUS
50 mm (2 in) travel stage with proprietary direct-drive motor technology,
1 Vp-p sinusoidal output linear encoder and limits (High Accuracy Version)
ANT95-75-L
75 mm (3 in) travel stage with proprietary direct-drive motor technology,
1 Vp-p sinusoidal output linear encoder and limits
ANT95-75-L-PLUS
75 mm (3 in) travel stage with proprietary direct-drive motor technology,
1 Vp-p sinusoidal output linear encoder and limits (High Accuracy Version)
ANT95-100-L
100 mm (4 in) travel stage with proprietary direct-drive motor technology,
1 Vp-p sinusoidal output linear encoder and limits
ANT95-100-L-PLUS 100 mm (4 in) travel stage with proprietary direct-drive motor technology,
1 Vp-p sinusoidal output linear encoder and limits (High Accuracy Version)
Options
-MP
-AP

24

Breadboard mounting plate
XY adapter plate (6 mm thick; ANT95-50-L and ANT95-50-L-PLUS only)

www.aerotech.com

nano Motion Technology

Two Axis, Mechanical Bearing,Linear Motor Stage

NANO Technology

ANT95-XY Series

Integrated low-profile XY linear motor stage
ANT95-XY Series

25 mm x 25 mm or 50 mm x 50 mm travel
Nanometer-level performance in a large
travel format
High resolution (1 nm), repeatability(75 nm), and accuracy (250 nm) per axis
In-position stability of <1 nm
Anti-creep crossed-roller bearings
High dynamic performance

Aerotech’s ANT series stages are the world’s first nanometerlevel positioning systems with greater than 25 mm travel. The
ANT95-XY crossed-roller-bearing, linear motor, dual-axis
stage continues the evolution of the ANT series of stages. The
ANT95-XY and ANT95-XY-PLUS are three-piece designs thatallow travel in two dimensions (X and Y). The sleek design
provides an extremely low profile of only 60 mm. The stage
comes with proprietary direct-drive motor technology,
noncontact linear encoders, limits, integrated cablemanagement system, and two grades of accuracy.

Stage Design
The ANT95-XY design allows critical elements such as
orthogonality, straightness, and flatness to be optimized,
resulting in a stage with exceptional geometrical tolerances.
Aerotech’s direct-drive technology has no hysteresis orbacklash, enabling accurate and repeatable nanometer-scale
motion in both the X and Y dimensions. Both travel options (25mm x 25 mm or 50 mm x 50 mm) come with the 60 mm
profile height. You can expect outstanding accuracy, position
repeatability, and in-position stability with the ANT95-XY stage.

Noncontact Direct-Drive
Only noncontact direct-drive technology offers the robust,
accurate, and high-speed positioning necessary for mass
production of precision devices. ANT95-XY stages utilize
advanced direct-drive technology pioneered by Aerotech toachieve the highest level of positioning performance. This
direct-drive technology is high-performance, non-cogging,noncontact, high-speed, high-resolution, and high-accuracy.

This unique drive and bearing combination, packaged in an
extremely small-profile and footprint, offers tangible
advantages in many applications such as high-precision
positioning, disk-drive fabrication, fiber alignment, opticaldelay element actuation, sensor testing, and scanning
processes that demand smooth and precise motion. The
integrated cable management system is designed for long life
and to minimize drag forces.

Multi-Axis Configurations
The ANT95-XY can be combined with other Aerotech ANT
series products (vertical lift stages, direct-drive rotaries, andgoniometers) to create unique, high performance, multi-axis
systems.
1110
98
Position (nm)Introduction

7
6
5
4
3
2
1
0
1
0

5

10

15
20
Time (s)25

30

ANT95-25-XY-PLUS lower axis 1 nm step plot. Best-in-classresolution and exceptional in-position stability for large travel stages.

www.aerotech.com

25

NANO Technology
ANT95-XY Series

ANT95-XY Series SPECIFICATIONS
Mechanical Specifications
TravelAccuracy(1)ANT95-25-XY

ANT95-25-XY-PLUS

ANT95-50-XY

25 mm

25 mm

50 mm

ANT95-50-XY-PLUS
50 mm±2.5 µm (±100 µin)±250 nm (±10 µin)±2.5 µm (±100 µin)±250 nm (±10 µin)

Resolution

1 nm (0.04 µin)

1 nm (0.04 µin)

1 nm (0.04 µin)

1 nm (0.04 µin)

Repeatability (Bi-Directional)(1)±100 nm (±4 µin)

±75 nm (±3 µin)±100 nm (±4 µin)

±75 nm (±3 µin)

Repeatability (Uni-Directional)±25 nm (±1 µin)

±25 nm (±1 µin)

±25 nm (±1 µin)

±25 nm (±1 µin)

Straightness(1)±1.0 µm (±40 µin)±1.0 µm (±40 µin)±1.0 µm (±40 µin)±1.0 µm (±40 µin)

Flatness(1)±1.0 µm (±40 µin)±1.0 µm (±40 µin)±1.0 µm (±40 µin)±1.0 µm (±40 µin)

Pitch

10 arc sec

10 arc sec

10 arc sec

10 arc sec

Roll

10 arc sec

10 arc sec

10 arc sec

10 arc sec

Yaw

5 arc sec

5 arc sec

5 arc sec

5 arc sec

Orthogonality

10 arc sec

3 arc sec

10 arc sec

3 arc sec

Maximum Speed

500 mm/s (20 in/s)(Upper Axis)

500 mm/s (20 in/s)(Upper Axis)

500 mm/s (20 in/s)(Upper Axis)

500 mm/s (20 in/s)(Upper Axis)

4.5 g - 45 m/s2
(No Load) (Upper Axis)

4.5 g - 45 m/s2
(No Load) (Upper Axis)

2.75 g - 27 m/s2
(No Load) (Upper Axis)

2.75 g - 27 m/s2
(No Load) (Upper Axis)

Maximum Acceleration

See graph for typical performance

Speed Stability

See graph for typical performance

Settling Time
In-Position Stability(2)<1 nm (<0.04 µin)

<1 nm (<0.04 µin)

<1 nm (<0.04 µin)7.75 N

7.75 N

9.5 N

9.5 N

Horizontal

4.0 kg (8.8 lb)

4.0 kg (8.8 lb)

6.0 kg (13.2 lb)

6.0 kg (13.2 lb)

Upper Axis

0.45 kg (1.0 lb)

0.45 kg (1.0 lb)

0.8 kg (1.8 lb)

0.8 kg (1.8 lb)

Lower Axis

1.13 kg (2.5 lb)

1.13 kg (2.5 lb)

2.1 kg (4.6 lb)

2.1 kg (4.6 lb)

1.8 kg (4 lb)

1.8 kg (4 lb)

3.2 kg (7 lb)

3.2 kg (7 lb)

Maximum Force (Continuous)
Load Capacity(3)Moving Mass
Stage Mass

<1 nm (<0.04 µin)

Aluminum Body/Black Hardcoat Finish

Material

20,000 Hours

MTBF (Mean Time Between Failure)

Notes:
1. Certified with each stage.
2. In-Position Jitter listing is 3 sigma value.
3. Axis orientation for on-axis loading is listed.
• Specifications are per axis, measured 25 mm above the tabletop. Consult factory for multi-axis or non-standard applications.
• -PLUS requires the use of an Aerotech controller.

Electrical Specifications

ANT95-25-XY

ANT95-25-XY-PLUS

ANT95-50-XY

Drive System

Brushless Linear Servomotor

Feedback

Noncontact Linear Encoder±40 VDC

Maximum Bus Voltage
Limit Switches

5 V, Normally Closed

Home Switch

Near Center

Recommended Controller

ANT95-25-XY

ANT95-25-XY-PLUS

ANT95-50-XY

A3200

Npaq-MXR
Npaq MR-MXH
Ndrive ML-MXH

Ensemble

Epaq-MXH
Epaq MR-MXH
Ensemble ML-MXH

Soloist

Soloist ML-MXH

Multi-Axis

Single Axis

ANT95-50-XY-PLUS

ANT95-50-XY-PLUS

Notes:
1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within
0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech Application Engineering for more information.

26

www.aerotech.com

80

100.1560
Position Error (nm)

100

100.2

100.1
100.05
100
99.95
99.9

← 164 ms Move and Settle

20
0
20
40

99.8

80

99.75

100
6

4

2

0
2
Position (mm)

4

0

6

ANT95-25-XY-PLUS velocity performance at 100 mm/s and 1 kg
payload for the X (lower) axis. This outstanding speed stability
enhances most scanning or laser machining applications.

1000

400

750
Straightness Error (nm)

200
100
0
100
200
300

100

200

300
400
500
Move Time (ms)

600

700

800

ANT95-25-XY-PLUS step and settle performance at full traveland 1 kg payload for the X (lower) axis. Industry-best settling
times significantly improve throughput for most applications.

500

300
Position Error (nm)

40

60

99.85

500
250
0
250
500
750

400

1000

500
10

5

0
Position (mm)

5

10

10

ANT95-25-XY-PLUS accuracy and repeatability, five runs, bi-directional
for the X (lower) axis. The total accuracy of 240 nm over 25 mm travel issignificantly better than other offerings and half of its stated specification.

50
Position (mm)510

ANT95-25-XY-PLUS bi-directional straightness error for the Y(upper) axis. Significantly (five times) better than statedspecification.

560
Orthogonality () = -1.5 arc-sec

4

50

3

40
30

Yaw (arc sec)

Y Position (mm)Step Size: 25 mm
Speed: 500 mm/s
Settle Spec: ±20 nm

ANT95-XY Series

Velocity (mm/s)

100.25NANO Technology

ANT95-XY/ANT95-XY-PLUS Series PERFORMANCE

30,000X Magnification

20
10

2
1
0
1
2
3

0
10
10

4
5
0

10

20
30
X Position (mm)

40

50

60

ANT95-50-XY-PLUS orthogonality. The inset is exaggerated
30,000X for clarity. Exceptionally small angular (orthogonality)
error significantly enhances system accuracy.

20

10

0
Position (mm)1020

ANT95-50-XY-PLUS Y (upper) axis yaw, five runs, bi-directional.
Highly repeatable, lowest angular error over full travel.

www.aerotech.com

27NANO Technology
ANT95-XY Series

ANT95-25-XY/ANT95-25-XY-PLUS DIMENSIONS
ANT95-25-XY/ANT95-25-XY-PLUS
50
25
TYP

25
TYP

CUSTOMER MOUNTING
4.0
12X M4x0.7
29.5
TYP

25
TYP

25
50

25
TYP

37.5
TYP

29.5
TYP

37.5
TYP
LOWER AXIS
MOTOR FEEDBACK PIGTAIL~1M[3.3FT]

25

UPPER AXIS
MOTOR FEEDBACK PIGTAIL~1M[3.3FT]

13
1/2 LIMITTRAVEL
12.5
1/2 NORMALTRAVEL14
1/2 HARDSTOPTRAVEL

12.5
1/2 NORMALTRAVEL

60

50
100

25
TYP

13
1/2 LIMITTRAVEL14
1/2 HARDSTOPTRAVEL

2.5
TYP
12.5
TYP
75
CUSTOMER MOUNTING
4X 4.8 THRU
(CLEARANCE FOR M4 SHCS)

100
115

140

28

www.aerotech.com

DIMENSIONS: MILLIMETERS

NANO Technology

ANT95-50-XY/ANT95-50-XY-PLUS DIMENSIONS
ANT95-50-XY/ANT95-50-XY-PLUS
125

7.5
TYP
25
TYP

75
CUSTOMER MOUNTING
4.0
17X M4x0.7

ANT95-XY Series

25
TYP
75

32.5
TYP

50

20
TYP

25
TYP

45
TYP
LOWER AXIS
MOTOR FEEDBACK PIGTAIL~1M[3.3FT]

100

26.5
1/2 HARDSTOPTRAVEL25
1/2 NORMALTRAVEL

25.5
1/2 LIMITTRAVEL

UPPER AXIS
MOTOR FEEDBACK PIGTAIL~1M[3.3FT]
25
1/2 NORMALTRAVEL

60

50

45
TYP

75

32.5
TYP

25.5
1/2 LIMITTRAVEL

2.5
TYP
20
TYP
CUSTOMER MOUNTING
8X 4.8 THRU
(CLEARANCE FOR M4 SHCS)

140
180

26.5
1/2 HARDSTOPTRAVEL

100
140
155

DIMENSIONS: MILLIMETERS

www.aerotech.com

29

ANT95-25-XY
ANT95-25-XY-PLUS

76.2
[3.0]
11.9
TYP

STAGE MOUNTING
4X M4x0.7 THRU

ANT95-XY Series

NANO Technology

ANT95-25-XY/ANT95-50-XY and ANT95-25-XY-PLUS/ANT95-50-XY-PLUS Mounting Plate DIMENSIONS

25
TYP

50

76.2
[3.0]

75

11.9
TYP

12.5
TYP

12.5
TYP

BREADBOARD MOUNTING PATTERN
4X M6 OR 1/4 BOLT C'BORE SLOT

75

100

ANT95-50-XY
ANT95-50-XY-PLUS

19.2
TYP
STAGE MOUNTING
4X M4x0.7 THRU100

DIMENSIONS: MILLIMETERS

101.6
[4.0]
75

101.6
[4.0]

32.5
TYP

100

19.2
TYP

140

20
TYP
20
TYP

100

140

BREADBOARD MOUNTING PATTERN
4X M6 OR 1/4 BOLT C'BORE SLOTDIMENSIONS: MILLIMETERS

ANT95-XY Series ORDERING INFORMATION
ANT95-XY Series Linear Stage
ANT95-XY/ANT95-XY-PLUS

Aerotech nanotranslation crossed-roller linear positioner

Linear Stage Travel
ANT95-25-XY
25 mm (1 in) XY travel stage with proprietary direct-drive motor technology,
1 Vp-p sinusoidal output linear encoder, and limits
ANT95-25-XY-PLUS 25 mm (1 in) XY travel stage with proprietary direct-drive motor technology,
1 Vp-p sinusoidal output linear encoder, and limits (High Accuracy Version)
50 mm (2 in) XY travel stage with proprietary direct-drive motor technology,
ANT95-50-XY
1 Vp-p sinusoidal output linear encoder, and limits
ANT95-50-XY-PLUS 50 mm (2 in) XY travel stage with proprietary direct-drive motor technology,
1 Vp-p sinusoidal output linear encoder, and limits (High Accuracy Version)
Options-MP
Breadboard mounting plate30

www.aerotech.com

1010

Two Axis, Mechanical Bearing,Linear Motor Stage

NANO Technology

nano Motion Technology

ANT95-XY-ULTRA

Integrated low profile XY linear motor stage
ANT95-XY-ULTRA Series

25 mm x 25 mm or 50 mm x 50 mm travel
Nanometer-level performance in a large
travel format
2D system accuracy is 250 nm
In-position stability of <1 nm
High dynamic performance

Introduction

ULTRA Trajectory Management System

Aerotech’s ANT95-XY-ULTRA is a long travel (up to 50 mm x
50 mm) nanopositioner for XY applications. Each axis uses
crossed-roller bearings, as well as Aerotech’s unique directdrive for non-cogging, zero backlash motion. In addition,
each stage receives a two-dimensional correction to achieve
unmatched nanometer resolution, accuracy, and repeatability.
This unique drive and bearing combination, packaged in an
extremely low profile and small footprint, offers tangible
advantages in your motion application.

In order to achieve the highest possible system accuracy fromour multi-axis nanopositioning systems, Aerotech hasdeveloped an advanced, interactive, dynamic trajectory
management system. To take advantage of this sophisticatedinteractive calibration system, the mechanical system has to becompletely assembled and functionally tested prior tocalibration in our best-in-class metrology labs. Nano-levelsystem accuracy can only be achieved under stringent
environmental conditions, calibrating with the best test
equipment, and utilizing the formidable capability of
ULTIMUS. By implementing the ULTIMUS dynamic trajectory
management system with the ANT95-XY-ULTRA, we are able
to produce 2-dimensional accuracies of ±250 nm or better.

3
2
1
0
-1
-2
-3
25

12.5

0
-12.5
-25
Position (mm)

0

-25

12.5

25

-12.5
Position (mm)

ANT95-50-XY 2D accuracy plot showing planar accuracy error
including straightness, orthogonality, and stage yawing.

The plots below illustrate performance differences between astandard ANT95-XY and the -ULTRA version. Straightness
errors, orthogonality errors, and accuracy errors caused bystage yawing are virtually eliminated.

Accuracy Error (μm)

Accuracy Error (μm)

The ANT95-XY-ULTRA extends the performance capability of
Aerotech’s ANT95-XY stage series to levels found nowhere
else. The exceptional geometric and dynamic performance of
the ANT95-XY-ULTRA make it an ideal choice for nearly all
high-end motion applications in the lab or in production
environments.

3
2
1
0
-1
-2
-3
25

12.5

0
-12.5
-25
Position (mm)

0

-25

12.5

25

-12.5
Position (mm)

ANT95-50-XY-ULTRA – exceptional 2D system accuracy with
Aerotech’s ULTRA version.

www.aerotech.com

31NANO Technology
ANT95-XY-ULTRA Series

ANT95-XY-ULTRA Series SPECIFICATIONS
Mechanical Specifications
Travel2D Accuracy(1)ANT95-25-XY-ULTRA

ANT95-50-XY-ULTRA

25 mm

50 mm

±250 nm (±10 µin)±250 nm (±10 µin)

Resolution

1 nm (0.04 µin)

1 nm (0.04 µin)

Repeatability (Bi-Directional)(1)±75 nm (±3 µin)

±75 nm (±3 µin)

Repeatability (Uni-Directional)±25 nm (±1 µin)

±25 nm (±1 µin)

Straightness(1)±250 nm (±10 µin)±250 nm (±10 µin)

Flatness(1)±1.0 µm (±40 µin)±1.0 µm (±40 µin)

Pitch

10 arc sec

10 arc sec

Roll

10 arc sec

10 arc sec

Yaw

5 arc sec

5 arc sec

Orthogonality

1.0 arc sec

1.0 arc sec

Maximum Speed

500 mm/s (20 in/s)(Upper Axis)

500 mm/s (20 in/s)(Upper Axis)

4.5 g - 45 m/s2
(No Load) (Upper Axis)

2.75 g - 27 m/s2
(No Load) (Upper Axis)

Maximum Acceleration

See graph for typical performance

Speed Stability

See graph for typical performance

Settling Time
In-Position Stability(2)<1 nm (<0.04 µin)

Load Capacity(3)Moving Mass

<1 nm (<0.04 µin)7.75 N

9.5 N

Horizontal

4.0 kg (8.8 lb)

6.0 kg (13.2 lb)

Upper Axis

0.45 kg (1.0 lb)

0.8 kg (1.8 lb)

Lower Axis

1.13 kg (2.5 lb)

2.1 kg (4.6 lb)

Maximum Force (Continuous)

1.8 kg (4 lb)

Stage Mass

3.2 kg (7 lb)
Aluminum Body/Black Hardcoat Finish

Material

20,000 Hours

MTBF (Mean Time Between Failure)

Notes:
1. Certified with each stage.
2. In-Position Jitter listing is 3 sigma value.
3. Axis orientation for on-axis loading is listed.
• Specifications are for XY systems measured 25 mm above the tabletop. Consult factory for non-standard applications.
• -ULTRA requires the use of an Aerotech controller.

Electrical Specifications

ANT95-25-XY-ULTRA

ANT95-50-XY-ULTRA

Drive System

Brushless Linear Servomotor

Feedback

Noncontact Linear Encoder±40 VDC

Maximum Bus Voltage
Limit Switches

5 V, Normally Closed

Home Switch

Near Center

Recommended Controller

ANT95-25-XY-ULTRA

A3200

Ensemble

Epaq-MXH
Epaq MR-MXH
Ensemble ML-MXH

Soloist

Soloist ML-MXH

Multi-Axis

Single Axis

ANT95-50-XY-ULTRA
Npaq-MXR
Npaq MR-MXH
Ndrive ML-MXH

Notes:
1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within
0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech Application Engineering for more information.

32

www.aerotech.com

80

100.1560
Position Error (nm)

100

100.2

100.1
100.05
100
99.95
99.9

40

0
20
40
60

99.8

80

99.75

100
6

4

2

0
2
Position (mm)

4

0

6

ANT95-25-XY-ULTRA velocity performance at 100 mm/s and 1 kg
payload for the X (lower) axis. This outstanding speed stability
enhances most scanning or laser machining applications.

9750
Straightness Error (nm)

1000

7
6
5
4
3
2
1

100

200

300
400
500
Move Time (ms)

600

700

800

ANT95-25-XY-ULTRA step and settle performance at full traveland 1 kg payload for the X (lower) axis. Industry-best settling
times significantly improve throughput for most applications.

1110
8
Position (nm)← 164 ms Move and Settle

20

99.85

Standard
Ultra

500
250
0
250
500
750

0
1
0

5

10

15
20
Time (s)

25

1000

30

20

ANT95-25-XY-ULTRA lower axis, 1 nm step plot. Best-in-classresolution and exceptional in-position stability for large travel
stages.

100Position (mm)1020

ANT95-25-XY straightness error comparison between the BASE
and ULTRA models shows a dramatic improvement in thisspecification.

560
Orthogonality (4) = +0.1 arc-sec

50

3

40

2

30

Yaw (arc sec)

Y Position (mm)Step Size: 25 mm
Speed: 500 mm/s
Settle Spec: ±20 nm

ANT95-XY-ULTRA Series

Velocity (mm/s)

100.25NANO Technology

ANT95-XY-ULTRA Series PERFORMANCE

100,000X Magnification

20
10

1
0
1
2
3

0
10
10

4
5
0

10

20
30
X Position (mm)

40

50

60

ANT95-50-XY-ULTRA orthogonality. The inset is magnified
100,000X for clarity. The ULTRA model orthogonality is a twentyfold improvement over the BASE model orthogonality.

20

10

0
Position (mm)1020

ANT95-50-XY-ULTRA Y (upper) axis yaw, five runs, bi-directional.
Highly repeatable, lowest angular error over full travel.

www.aerotech.com

33

NANO Technology
ANT95-XY-ULTRA Series

ANT95-25-XY-ULTRA DIMENSIONS
ANT95-25-XY-ULTRA
50
25
TYP

25
TYP

CUSTOMER MOUNTING
4.0
12X M4x0.7
29.5
TYP

25
TYP

25
50

25
TYP

37.5
TYP

29.5
TYP

37.5
TYP
LOWER AXIS
MOTOR FEEDBACK PIGTAIL~1M[3.3FT]

25

UPPER AXIS
MOTOR FEEDBACK PIGTAIL~1M[3.3FT]

13
1/2 LIMITTRAVEL
12.5
1/2 NORMALTRAVEL14
1/2 HARDSTOPTRAVEL

12.5
1/2 NORMALTRAVEL

60

50
100

25
TYP

13
1/2 LIMITTRAVEL14
1/2 HARDSTOPTRAVEL

2.5
TYP
12.5
TYP
75
CUSTOMER MOUNTING
4X 4.8 THRU
(CLEARANCE FOR M4 SHCS)

100
115

140

34

www.aerotech.com

DIMENSIONS: MILLIMETERS

NANO Technology

ANT95-50-XY-ULTRA DIMENSIONS
ANT95-50-XY-ULTRA
125

7.5
TYP
25
TYP

75
CUSTOMER MOUNTING
4.0
17X M4x0.7

ANT95-XY-ULTRA Series

25
TYP
75

32.5
TYP

50

20
TYP

25
TYP

45
TYP
LOWER AXIS
MOTOR FEEDBACK PIGTAIL~1M[3.3FT]

100

26.5
1/2 HARDSTOPTRAVEL25
1/2 NORMALTRAVEL

25.5
1/2 LIMITTRAVEL25
1/2 NORMALTRAVEL60

50
75

UPPER AXIS
MOTOR FEEDBACK PIGTAIL~1M[3.3FT]

45
TYP
32.5
TYP

25.5
1/2 LIMITTRAVEL

2.5
TYP
20
TYP
CUSTOMER MOUNTING
8X 4.8 THRU
(CLEARANCE FOR M4 SHCS)

140
180

26.5
1/2 HARDSTOPTRAVEL

100
140
155

DIMENSIONS: MILLIMETERS

www.aerotech.com

35

ANT95-25-XY-ULTRA

76.2
[3.0]
11.9
TYP

STAGE MOUNTING
4X M4x0.7 THRU

ANT95-XY-ULTRA Series

NANO Technology

ANT95-25-XY-ULTRA/ANT95-50-XY-ULTRA Mounting Plate DIMENSIONS

50

76.2
[3.0]

25
TYP

75

11.9
TYP

100

12.5
TYP

12.5
TYP
75

BREADBOARD MOUNTING PATTERN
4X M6 OR 1/4 BOLT C'BORE SLOT100

ANT95-50-XY-ULTRA

19.2
TYP

STAGE MOUNTING
4X M4x0.7 THRUDIMENSIONS: MILLIMETERS

101.6
[4.0]
75

32.5
TYP

101.6
[4.0]

100

19.2
TYP

140

20
TYP
20
TYP

100

BREADBOARD MOUNTING PATTERN
4X M6 OR 1/4 BOLT C'BORE SLOT140

DIMENSIONS: MILLIMETERS

ANT95-XY-ULTRA Series ORDERING INFORMATION
ANT95-XY-ULTRA Series Linear Stage
ANT95-XY-ULTRA
Aerotech nanotranslation crossed-roller linear positioner with 2D calibration
Linear Stage Travel
ANT95-25-XY-ULTRA
ANT95-50-XY-ULTRA
Options-MP

36

25 mm (1 in) XY travel stage with proprietary direct-drive motor technology,
1 Vp-p sinusoidal output linear encoder, and limits
50 mm (2 in) XY travel stage with proprietary direct-drive motor technology,
1 Vp-p sinusoidal output linear encoder, and limits
Breadboard mounting plate

www.aerotech.com

1010

nano Motion Technology

Mechanical-Bearing
Linear Motor Stage

ANT130-L Series

Nanometer-level performance ina large travel format

NANO Technology

ANT130-L SeriesHigh resolution (1 nm), repeatability(75 nm), and accuracy (250 nm)
In-position stability of <1 nm
Anti-creep crossed-roller bearings
High dynamic performance
Large selection – 8 models in travel andaccuracy

The ANT130-L series stages offer nanometer-level
performance in travels up to 160 mm. With its low profile andoutstanding performance characteristics, the ANT130-L is theultimate solution for high-accuracy alignment, inspection,
positioning, and measurement stations.

Noncontact Direct-Drive
The linear motor drive also offers the advantage of higher
speeds and accelerations. The compact yet powerful linear
motor drives the ANT130-L to a peak unloaded accelerationof 1 g and a maximum velocity of 350 mm/s. The result is ahigh-accuracy device with outstanding throughput thatsignificantly outperforms comparable high-accuracy screwdriven or other stages in its class.

Outstanding Resolution
For alignment applications, outstanding step-to-step resolution
is critical. The ANT130-L meets this demand with anincremental step size of 1 nm when coupled with Aerotech
drives and controls. The direct-drive linear motor allows the
ANT130-L to make precise, small resolution steps. This isparticularly important in alignment applications where step
accuracy is critical.

Designed for Long Life
Like all stages in the Aerotech product family, the ANT130-L
was designed for outstanding long-term performance. Both thelinear motor and linear encoder are noncontact devices,which means they not only exhibit long-life but are totally
maintenance free.

Precision Alignment
ANT130-L series stages are easily configured as XY
assemblies. Options include precision orthogonality alignment
to 5 arc seconds and vertical axis solutions.

11
10
9
8
Position (nm)Introduction

7
6
5
4
3
2
1
0
1
0

5

10

15
20
Time (s)25

30

ANT130-060-L-PLUS 1 nm step plot with 100 Hz filter. Thesestages offer best-in-class resolution and exceptional in-position
stability for large travels.

www.aerotech.com

37NANO Technology
ANT130-L Series

ANT130-L/ANT130-L-PLUS Series SPECIFICATIONS
Mechanical Specifications
TravelAccuracy(1)ANT130-035-L

ANT130-035-L-PLUS

ANT130-060-L

35 mm

35 mm

60 mm

ANT130-060-L-PLUS
60 mm±2 µm (±80 µin)±250 nm (±10 µin)

±2 µm (±80 µin)±250 nm (±10 µin)

Resolution

1 nm (0.04 µin)

1 nm (0.04 µin)

1 nm (0.04 µin)

1 nm (0.04 µin)

Repeatability (Bi-Directional)(1)±100 nm (±4 µin)

±75 nm (±3 µin)±100 nm (±4 µin)

±75 nm (±3 µin)

Repeatability (Uni-Directional)±25 nm (±1 µin)

±25 nm (±1 µin)

±25 nm (±1 µin)

±25 nm (±1 µin)

Straightness(1)±1.0 µm (±40 µin)±1.0 µm (±40 µin)±1.0 µm (±40 µin)±1.0 µm (±40 µin)

Flatness(1)±1.0 µm (±40 µin)±1.0 µm (±40 µin)±1.0 µm (±40 µin)±1.0 µm (±40 µin)

Pitch

10 arc sec

10 arc sec

10 arc sec

10 arc sec

Roll

10 arc sec

10 arc sec

10 arc sec

10 arc sec

Yaw

5 arc sec

5 arc sec

5 arc sec

5 arc sec

350 mm/s (14 in/s)

350 mm/s (14 in/s)

350 mm/s (14 in/s)

350 mm/s (14 in/s)

1 g - 10 m/s2 (No Load)

1 g - 10 m/s2 (No Load)

1 g - 10 m/s2 (No Load)

1 g - 10 m/s2 (No Load)

Maximum Speed
Maximum Acceleration

See graph for typical performance

Speed Stability

See graph for typical performance

Settling Time
In-Position Stability(2)Maximum Force (Continuous)
Horizontal
Load Capacity(3)Side<1 nm (<0.04 µin)

<1 nm (<0.04 µin)

<1 nm (<0.04 µin)

23 N

23 N

23 N

<1 nm (<0.04 µin)
23 N

12.0 kg (26.5 lb)

12.0 kg (26.5 lb)

12.0 kg (26.5 lb)

12.0 kg (26.5 lb)

10 kg (22 lb)

10 kg (22 lb)

10 kg (22 lb)

10 kg (22 lb)

Moving Mass

1.2 kg (2.6 lb)

1.2 kg (2.6 lb)

1.4 kg (3.1 lb)

1.4 kg (3.1 lb)

Stage Mass

2.1 kg (4.6 lb)

2.1 kg (4.6 lb)

2.5 kg (5.5 lb)

2.5 kg (5.5 lb)

Aluminum Body/Black Hardcoat Finish

Material

30,000 Hours

MTBF (Mean Time Between Failure)

Notes:
1. Certified with each stage.
2. In-Position Jitter listing is 3 sigma value.
3. Axis orientation for on-axis loading is listed.
• Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of combined multi-axis systems is payload and workpoint dependent. Consult factory for
multi-axis or non-standard applications.
• -PLUS requires the use of an Aerotech controller.

Mechanical Specifications
TravelAccuracy(1)ANT130-110-L

ANT130-110-L-PLUS

ANT130-160-L

110 mm

110 mm

160 mmANT130-160-L-PLUS
160 mm±3 µm (±120 µin)±300 nm (±12 µin)

±4 µm (±160 µin)±300 nm (±12 µin)

Resolution

1 nm (0.04 µin)

1 nm (0.04 µin)

1 nm (0.04 µin)

1 nm (0.04 µin)

Repeatability (Bi-Directional)(1)±100 nm (±4 µin)

±75 nm (±3 µin)±100 nm (±4 µin)

±75 nm (±3 µin)

Repeatability (Uni-Directional)±25 nm (±1 µin)

±25 nm (±1 µin)

±25 nm (±1 µin)

±25 nm (±1 µin)

Straightness(1)±1.0 µm (±40 µin)±1.0 µm (±40 µin)±1.5 µm (±60 µin)±1.5 µm (±60 µin)

Flatness(1)±1.5 µm (±60 µin)±1.0 µm (±40 µin)±1.0 µm (±40 µin)±1.5 µm (±60 µin)

Pitch

10 arc sec

10 arc sec

10 arc sec

10 arc sec

Roll

10 arc sec

10 arc sec

10 arc sec

10 arc sec

Yaw
Maximum Speed
Maximum Acceleration

5 arc sec

5 arc sec

5 arc sec

5 arc sec

350 mm/s (14 in/s)

350 mm/s (14 in/s)

350 mm/s (14 in/s)

350 mm/s (14 in/s)

1 g - 10 m/s2 (No Load)

1 g - 10 m/s2 (No Load)

1 g - 10 m/s2 (No Load)

1 g - 10 m/s2 (No Load)See graph for typical performance

Speed Stability

See graph for typical performance

Settling Time
In-Position Stability(2)Maximum Force (Continuous)
Horizontal
Load Capacity(3)<1 nm (<0.04 µin)

<1 nm (<0.04 µin)

<1 nm (<0.04 µin)

23 N

23 N

23 N

<1 nm (<0.04 µin)
23 N

12.0 kg (26.5 lb)

12.0 kg (26.5 lb)

12.0 kg (26.5 lb)

12.0 kg (26.5 lb)

10 kg (22 lb)

10 kg (22 lb)

10 kg (22 lb)

10 kg (22 lb)

Moving Mass

1.9 kg (4.2 lb)

1.9 kg (4.2 lb)

2.3 kg (5.1 lb)

2.3 kg (5.1 lb)

Stage Mass

3.3 kg (7.3 lb)

3.3 kg (7.3 lb)

3.9 kg (8.6 lb)

3.9 kg (8.6 lb)

Side

Material
MTBF (Mean Time Between Failure)

Aluminum Body/Black Hardcoat Finish
30,000 Hours

Notes:
1. Certified with each stage.
2. In-Position Jitter listing is 3 sigma value.
3. Axis orientation for on-axis loading is listed.
• Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of combined multi-axis systems is payload and workpoint dependent. Consult factory for
multi-axis or non-standard applications.
• -PLUS requires the use of an Aerotech controller.

38

www.aerotech.com

Electrical
Specifications

ANT130-035-L
ANT130-060-L
ANT130-110-L
ANT130-160-L
ANT130-035-L-PLUS ANT130-060-L-PLUS ANT130-110-L-PLUS ANT130-160-L-PLUS

Drive System

Brushless Linear Servomotor

Feedback

Noncontact Linear Encoder±40 VDC

Maximum Bus Voltage
Limit Switches

5 V, Normally Closed

Home Switch

Near Center

ANT130-035-L
ANT130-060-L
ANT130-110-L
ANT130-160-L
ANT130-035-L-PLUS ANT130-060-L-PLUS ANT130-110-L-PLUS ANT130-160-L-PLUS

A3200

Npaq-MXR
Npaq MR-MXH
Ndrive ML-MXH

Ensemble

Epaq-MXH
Epaq MR-MXH
Ensemble ML-MXH

Soloist

Soloist ML-MXH

Multi-Axis

Single Axis

ANT130-L Series

Recommended
Controller

NANO Technology

ANT130-L/ANT130-L-PLUS Series SPECIFICATIONS

Notes:
1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within
0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech Application Engineering for more information.

www.aerotech.com

39

100.25

100

100.2

80

100.1560
Position Error (nm)

Velocity (mm/s)

NANO Technology
ANT130-L Series

ANT130-L/ANT130-L-PLUS Series PERFORMANCE

100.1
100.05
100
99.95
99.9

0
20
40

99.8

80
100

99.75
20

15

10

5
0
5
Position (mm)

10

15

0

20

Straightness Error (nm)300
Position Error (nm)400600Move Time (ms)

800

1000

1500
1250

400

200
100
0
100
200
300

1000
750
500
250
0
250
500
750
1000

400

1250
20

10

0
10
Position (mm)

20

30

1500
30

20

10

0
10
Position (mm)20

ANT130-060-L-PLUS yaw, five runs, bi-directional. Highly
repeatable, minimal yaw error enhances system positioning
accuracy.

www.aerotech.com

30

20

10

0
10
Position (mm)2030

ANT130-060-L-PLUS straightness error, bi-directional.
Exceptional and highly repeatable performance is assured withminimal straightness error.

Pitch (arc sec)

ANT130-060-L-PLUS accuracy and repeatability, five runs, bidirectional over an extended period of time shows the high level ofsystem accuracy and repeatability.

Yaw (arc sec)

200

ANT130-060-L-PLUS step and settle performance with 1 kg
payload. Outstanding settling time enhances throughput of mostapplications.

500

7
6
5
4
3
2
1
0
1
2
3
4
5
6
7
30

← 216 ms Move and Settle

20

60

ANT130-060-L-PLUS velocity performance at 100 mm/s and
1 kg payload. Excellent speed stability is another feature of
the ANT series stages.

40

40

99.85

500
30

Step Size: 50 mm
Speed: 350 mm/s
Settle Spec: ±20 nm

7
6
5
4
3
2
1
0
1
2
3
4
5
6
7
30

20

10

0
10
Position (mm)20

ANT130-060-L-PLUS pitch, five runs, bi-directional. Excellent
repeatability/accuracy contribute to improved processing.

30

NANO Technology

ANT130-L/ANT130-L-PLUS DIMENSIONS
125
90
50

75
SQ.

50

CL

ANT130-L Series

CL

120

M6X1.07(19) PLACESCENTERED ON CARRIAGE

D/2

D/2

B/2

130

C/2

A

45

C
120
1.

D

90

12.7

200

8
1. ANT130-110-L AND ANT130-160-L ONLY
6.8
DETAIL CSCALE 2 : 5
MOUNTING HOLES TYP.

MODEL

A = STAGELENGTH

B = NOMINALTRAVELC = LIMITTRAVELD = HARDSTOPTRAVELE

ANT130-035-L

155

35

41

50

27

ANT130-060-L

180

60

66

75

42

ANT130-110-L

230

110

116

125

67

ANT130-160-L

280

160

166

175

92

DIMENSIONS: MILLIMETERS

www.aerotech.com

41

B

STAGE MOUNTING
M6 x 1.0 THRU

ANT130-L Series

NANO Technology

ANT130-L/ANT130-L-PLUS Mounting Plate DIMENSIONS

120

D

E

F

G

A

H

C

BREADBOARD MOUNTING
M6 OR 1/4-20 BOLTC'BORE SLOT

15

90

130

DIMENSIONS: MILLIMETERS

42

www.aerotech.com

ANT130-L Series Linear Stage
ANT130-L/ANT130-L-PLUS

Aerotech nanotranslation crossed-roller linear positioner

35 mm travel stage with linear motor and limits
35 mm travel stage with linear motor and limits (high accuracy version)
60 mm travel stage with linear motor and limits
60 mm travel stage with linear motor and limits (high accuracy version)
110 mm travel stage with linear motor and limits
110 mm travel stage with linear motor and limits (high accuracy version)
160 mm travel stage with linear motor and limits
160 mm travel stage with linear motor and limits (high accuracy version)

Output Cable Connectors-25DU
Single 25-pin D connector (standard)-4DU-25DU
4-pin HPD and 25-pin D connectors
Note: -25DU single 25-pin connector option not valid for systems using bus voltages greater than 80 V
Options-MP

ANT130-L Series

Linear Stage Travel
ANT130-035-L
ANT130-035-L-PLUS
ANT130-060-L
ANT130-060-L-PLUS
ANT130-110-L
ANT130-110-L-PLUS
ANT130-160-L
ANT130-160-L-PLUS

NANO Technology

ANT130-L/ANT130-L-PLUS Series ORDERING INFORMATION

Breadboard mounting plate

www.aerotech.com

43NANO Technology

ANT130-XY Seriesnano Motion Technology

Two Axis, Mechanical Bearing,Linear Motor Stage
AWARDS

ANT130-XY Series

Integrated low-profile XY linear motor stage
Nanometer-level performance in a large
travel format
High resolution (1 nm), repeatability(75 nm), and accuracy (250 nm) per axis
In-position stability of <1 nm
Anti-creep crossed-roller bearings
High dynamic performance

The ANT130-XY series stages offer nanometer-level
performance in travels up to 160 mm. The ANT130-XY and
ANT130-XY-PLUS are three-piece designs that allow travel in
two dimensions (X and Y). The sleek design provides anextremely low profile of only 85 mm. The stage comes with
proprietary direct-drive motor technology, noncontact linear
encoders, limits, integrated cable management system, andtwo grades of accuracy.

Stage Design
The ANT130-XY design allows critical elements such as
orthogonality, straightness, and flatness to be optimized,
resulting in a stage with exceptional geometrical tolerances.
Aerotech’s direct-drive technology has no hysteresis orbacklash, enabling accurate and repeatable nanometer-scale
motion in both the X and Y dimensions. All travel options (60mm x 60 mm, 110 mm x 110 mm, 160 mm x 160 mm) comewith the 85 mm profile height. You can expect outstanding
accuracy, position repeatability, and in-position stability with
the ANT130-XY stage.

extremely small-profile and footprint, offers tangible
advantages in many applications such as high-precision
positioning, disk-drive fabrication, fiber alignment, opticaldelay element actuation, sensor testing, and scanning
processes that demand smooth and precise motion. The
integrated cable management system is designed for long life
and to minimize drag forces.

Multi-Axis Configurations
The ANT130-XY can be combined with other Aerotech ANT
series products (vertical lift stages, direct-drive rotaries, andgoniometers) to create unique, high performance, multi-axis
systems.
11
10
9
8
7
6

Position (nm)Introduction

5
4
3
2

Noncontact Direct-Drive
Only noncontact direct-drive technology offers the robust,
accurate, and high-speed positioning necessary for mass
production of precision devices. ANT130-XY stages utilize
advanced direct-drive technology pioneered by Aerotech toachieve the highest level of positioning performance. This
direct-drive technology is high-performance, non-cogging,noncontact, high-speed, high-resolution, and high-accuracy.
This unique drive and bearing combination, packaged in an
44

www.aerotech.com

1
0
1
0

5

10

15

20
Time (s)

25

30

35

ANT130-160-XY-PLUS lower axis 1 nm step plot with 100 Hz
filter. Best-in-class resolution and exceptional in-position
stability for large travel stages.

Mechanical
Specifications

ANT130-060-XY ANT130-060-XY-PLUS ANT130-110-XY ANT130-110-XY-PLUS

TravelAccuracy(1)

60 mm

60 mm

110 mm

110 mm±2.5 µm (±100 µin)±250 nm (±10 µin)±4.0 µm (±160 µin)±300 nm (±12 µin)

Resolution

1 nm (0.04 µin)

1 nm (0.04 µin)

1 nm (0.04 µin)

1 nm (0.04 µin)

Repeatability (Bi-Directional)(1)±100 nm (±4 µin)

±75 nm (±3 µin)±100 nm (±4 µin)

±75 nm (±3 µin)

±25 nm (±1 µin)

±25 nm (±1 µin)

±25 nm (±1 µin)

±25 nm (±1 µin)

Straightness(1)±1.5 µm (±60 µin)±1.5 µm (±60 µin)±1.5 µm (±60 µin)±1.5 µm (±60 µin)

Flatness(1)±1.5 µm (±60 µin)±1.5 µm (±60 µin)±1.5 µm (±60 µin)±1.5 µm (±60 µin)

Pitch

10 arc sec

10 arc sec

12 arc sec

12 arc sec

Roll

10 arc sec

10 arc sec

12 arc sec

12 arc sec

Yaw

5 arc sec

5 arc sec

6 arc sec

6 arc sec

Orthogonality

10 arc sec

3 arc sec

10 arc sec

3 arc sec

Maximum Speed

350 mm/s (14 in/s)(Upper Axis)

350 mm/s (14 in/s)(Upper Axis)

350 mm/s (14 in/s)(Upper Axis)

350 mm/s (14 in/s)(Upper Axis)

1 g - 10 m/s2
(No Load)(Upper Axis)

1 g - 10 m/s2
(No Load)(Upper Axis)

1 g - 10 m/s2
(No Load)(Upper Axis)

1 g - 10 m/s2
(No Load)(Upper Axis)

Maximum Acceleration

See graph for typical performance

Speed Stability

See graph for typical performance

Settling Time
In-Position Stability(2)Maximum Force (Continuous)
Load Capacity(3)Moving Mass
Stage Mass
Material
MTBF (Mean Time
Between Failure)

ANT130-XY Series

Repeatability (Uni-Directional)

NANO Technology

ANT130-XY/ANT130-XY-PLUS Series SPECIFICATIONS

Horizontal<1 nm (<0.04 µin)

<1 nm (<0.04 µin)

<1 nm (<0.04 µin)

23 N

23 N

23 N

<1 nm (<0.04 µin)
23 N

12.0 kg (26.5 lb)

12.0 kg (26.5 lb)

12.0 kg (26.5 lb)

12.0 kg (26.5 lb)

Upper

1.5 kg (3.3 lb)

1.5 kg (3.3 lb)

2.1 kg (4.6 lb)

2.1 kg (4.6 lb)

Lower

4.2 kg (9.2 lb)

4.2 kg (9.2 lb)

5.7 kg (12.5 lb)

5.7 kg (12.5 lb)

5.5 kg (12.1 lb)

5.5 kg (12.1 lb)

7.4 kg (16.3 lb)

7.4 kg (16.3 lb)

Aluminum Body/Black Hardcoat Finish
30,000 Hours

Notes:
1. Certified with each stage.
2. In-Position Jitter listing is 3 sigma value.
3. Axis orientation for on-axis loading is listed.
• Specifications are per axis, measured 25 mm above the tabletop. Consult factory for multi-axis or non-standard applications.
• -PLUS requires the use of an Aerotech controller.

www.aerotech.com

45

NANO Technology
ANT130-XY Series

ANT130-XY/ANT130-XY-PLUS Series SPECIFICATIONS
Mechanical Specifications

ANT130-160-XY

Accuracy(1)ANT130-160-XY-PLUS

160 mm

160 mm

±5.0 µm (±200 µin)±300 nm (±12 µin)

TravelResolution

1 nm (0.04 µin)

1 nm (0.04 µin)

Repeatability (Bi-Directional)(1)±100 nm (±4 µin)

±75 nm (±3 µin)

Repeatability (Uni-Directional)±25 nm (±1 µin)

±25 nm (±1 µin)

Straightness(1)±2.0 µm (±80 µin)±2.0 µm (±80 µin)

Flatness(1)±2.0 µm (±80 µin)±2.0 µm (±80 µin)

Pitch

15 arc sec

15 arc sec

Roll

15 arc sec

15 arc sec

Yaw

8 arc sec

8 arc sec

Orthogonality

10 arc sec

3 arc sec

Maximum Speed

350 mm/s (14 in/s)(Upper Axis)

350 mm/s (14 in/s)(Upper Axis)

1 g - 10 m/s2
(No Load)(Upper Axis)

1 g - 10 m/s2
(No Load)(Upper Axis)

Maximum Acceleration

See graph for typical performance

Speed Stability

See graph for typical performance

Settling Time
In-Position Stability(2)<1 nm (<0.04 µin)

Maximum Force (Continuous)
Load Capacity(3)Horizontal

Moving Mass

<1 nm (<0.04 µin)

23 N

23 N

12.0 kg (26.5 lb)

12.0 kg (26.5 lb)

Upper

2.4 kg (5.3 lb)

2.4 kg (5.3 lb)

Lower

6.9 kg (15.2 lb)

6.9 kg (15.2 lb)

8.9 kg (19.6 lb)

8.9 kg (19.6 lb)

Stage Mass

Aluminum Body/Black Hardcoat Finish

Material

30,000 Hours

MTBF (Mean Time Between Failure)

Notes:
1. Certified with each stage.
2. In-Position Jitter listing is 3 sigma value.
3. Axis orientation for on-axis loading is listed.
• Specifications are per axis, measured 25 mm above the tabletop. Consult factory for multi-axis or non-standard applications.
• -PLUS requires the use of an Aerotech controller.

Electrical Specifications

ANT130-060-XY
ANT130-060-XY-PLUS

ANT130-110-XY
ANT130-110-XY-PLUS

Drive System

Brushless Linear Servomotor

Feedback

Noncontact Linear Encoder±40 VDC

Maximum Bus Voltage
Limit Switches

5 V, Normally Closed

Home Switch

Near Center

Recommended Controller

ANT130-060-XY
ANT130-060-XY-PLUS

ANT130-110-XY
ANT130-110-XY-PLUS

A3200

Npaq-MXR
Npaq MR-MXH
Ndrive ML-MXH

Ensemble

Epaq-MXH
Epaq MR-MXH
Ensemble ML-MXH

Soloist

Soloist ML-MXH

Multi-Axis

Single Axis

ANT130-160-XY
ANT130-160-XY-PLUS

ANT130-160-XY
ANT130-160-XY-PLUS

Notes:
1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within
0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech Application Engineering for more information.

46

www.aerotech.com

80

100.1560
Position Error (nm)

100

100.2

100.1
100.05
100
99.95
99.9

40

80
100
20

15

10

5
0
5
Position (mm)

10

15

0

20

ANT130-060-XY-PLUS velocity performance at 100 mm/s and 1 kg
payload for the X (lower) axis. This outstanding speed stability
enhances most scanning or laser machining applications.

200

400

600
800
Move Time (ms)

1000

1200

ANT130-060-XY-PLUS step and settle performance at full traveland 1 kg payload for the X (lower) axis. Industry-best settling
times significantly improve throughput for most applications.

500

1500
1250

400
Straightness Error (nm)300
Position Error (nm)

0
20

99.8
99.75

200
100
0
100
200
300

1000
750
500
250
0
250
500
750
1000

400

1250
60

40

20
0
20
Position (mm)

40

60

1500
30

80

ANT130-160-XY-PLUS accuracy and repeatability, five runs, bidirectional for the Y (upper) axis. The total accuracy of ±75 nm
over 160 mm travel is significantly better than other offerings.

Orthogonality () = 1.8 arc-sec

50

Yaw (arc sec)

40
30

30,000X Magnification

20
10
0

0

10

20
30
X Position (mm)

40

50

60

ANT130-060-XY-PLUS orthogonality. The inset is exaggerated
30,000X for clarity. Exceptionally small angular (orthogonality)
error significantly enhances system accuracy.

20

10

0
10
Position (mm)2030

ANT130-060-XY-PLUS bi-directional straightness error for the Y(upper) axis. Significantly (five times) better than statedspecification.

60

Y Position (mm)

20

60

10
10

Step Size: 60 mm
Speed: 350 mm/s
Settle Spec: ±20 nm

40

99.85

500
80

← 318 ms Move and Settle

ANT130-XY Series

Velocity (mm/s)

100.25NANO Technology

ANT130-XY/ANT130-XY-PLUS Series PERFORMANCE

7
6
5
4
3
2
1
0
1
2
3
4
5
6
7
30

20

10

0
10
Position (mm)2030

ANT130-060-XY-PLUS Y (upper) axis yaw, five runs, bi-directional.
Highly repeatable, lowest angular error over full travel.

www.aerotech.com

47

~16

ANT130-XY Series

NANO Technology

ANT130-XY/ANT130-XY-PLUS DIMENSIONS

~220

25
12.7

D/2

19X M6X1.0
7.0
CENTER ON
CARRIAGE

C/2

25

50

6.8

75

8

DETAIL A
SCALE 2 : 5
MOUNTING HOLE TYP.

D/2

B/2
50
75
B/2

90

C/2

D/2

125

D/2

MODEL

A = STAGELENGTH

B = NOMINALTRAVELC = LIMITTRAVELD = HARDSTOPTRAVELE

ANT130-060-XY

180

60 X 60

66 X 66

75 X 7542

ANT130-110-XY

230

110 X 110

116 X 116

125 X 12567

ANT130-160-XY

280

160 X 160

166 X 166

175 X 175

92

130

A

85

A
E

120

90

1. 200130A

1. ANT130-110-XY AND ANT130-160-XY ONLY

48

www.aerotech.com

DIMENSIONS: MILLIMETERS

120

NANO Technology

ANT130-XY/ANT130-XY-PLUS Mounting Plate DIMENSIONSB

STAGE MOUNTING
M6 x 1.0 THRU

ANT130-XY Series

120

D

E

F

G

A

H

C

BREADBOARD MOUNTING
M6 OR 1/4-20 BOLTC'BORE SLOT

15

90

130

DIMENSIONS: MILLIMETERS

www.aerotech.com

49

NANO Technology
ANT130-XY Series

ANT130-XY/ANT130-XY-PLUS Series ORDERING INFORMATION
ANT130-XY Series Linear Stage
ANT130-XY/ANT130-XY-PLUS
Aerotech nanotranslation crossed-roller linear positioner
Linear Stage Travel
ANT130-060-XY
ANT130-060-XY-PLUS
ANT130-110-XY
ANT130-110-XY-PLUS
ANT130-160-XY
ANT130-160-XY-PLUS

Output Cable Connectors-25DU
Single 25-pin D connector (standard)-4DU-25DU
4-pin HPD and 25-pin D connectors
Note: -25DU single 25-pin connector option not valid for systems using bus voltages greater than 80 V
Options-MP

50

60 mm travel XY stage with linear motor and limits
60 mm travel XY stage with linear motor and limits (high accuracy version)
110 mm travel XY stage with linear motor and limits
110 mm travel XY stage with linear motor and limits (high accuracy version)
160 mm travel XY stage with linear motor and limits
160 mm travel XY stage with linear motor and limits (high accuracy version)

Breadboard mounting plate

www.aerotech.com

Two Axis, Mechanical Bearing,Linear Motor Stage

NANO Technology

nano Motion Technology

ANT130-XY-ULTRA

Integrated low-profile XY linear motor stage
ANT130-XY-ULTRA Series

Nanometer-level performance in a large
travel format
2D system accuracy is 250 nm
In-position stability of <1 nm
High dynamic performance

Introduction

ULTRA Trajectory Management System

Aerotech’s ANT130-XY-ULTRA is a long travel (up to 160 mm
x 160 mm) nanopositioner for XY applications. Each axis uses
crossed-roller bearings, as well as Aerotech’s unique directdrive for non-cogging, zero backlash motion. In addition,
each stage receives a two-dimensional correction to achieve
unmatched nanometer resolution, accuracy, and repeatability.
This unique drive and bearing combination, packaged in an
extremely low profile and small footprint, offers tangible
advantages in your motion application.

In order to achieve the highest possible system accuracy fromour multi-axis nanopositioning systems, Aerotech hasdeveloped an advanced, interactive, dynamic trajectory
management system. To take advantage of this sophisticatedinteractive calibration system, the mechanical system has to becompletely assembled and functionally tested prior tocalibration in our best-in-class metrology labs. Nano-levelsystem accuracy can only be achieved under stringent
environmental conditions, calibrating with the best test
equipment, and utilizing the formidable capability of
ULTIMUS. By implementing the ULTIMUS dynamic trajectory
management system with the ANT130-XY-ULTRA, we are able
to produce 2-dimensional accuracies of ±250 nm or better.

3
2
1
0
-1
-2
-3
80

80
40

40
0

0
-40

Position (mm)The plots below illustrate performance differences between astandard ANT130-XY and the -ULTRA version. Straightness
errors, orthogonality errors, and accuracy errors caused bystage yawing are virtually eliminated.

Accuracy Error (μm)

Accuracy Error (μm)

The ANT130-XY-ULTRA extends the performance capability of
Aerotech’s ANT130-XY stage series to levels found nowhere
else. The exceptional geometric and dynamic performance of
the ANT130-XY-ULTRA make it an ideal choice for nearly all
high-end motion applications in the lab or in production
environments.

3
2
1
0
-1
-2
-3
80

80
40

40
0

-80

-80

Position (mm)

ANT130-160-XY 2D accuracy plot showing planar accuracy error
including straightness, orthogonality, and stage yawing.

0
-40

-40
Position (mm)

-40
-80

-80

Position (mm)

ANT130-160-XY-ULTRA – exceptional 2D system accuracy with
Aerotech’s ULTRA version.

www.aerotech.com

51

NANO Technology
ANT130-XY-ULTRA Series

ANT130-XY-ULTRA Series SPECIFICATIONS
Mechanical Specifications
Travel2D Accuracy(1)ANT130-060-XY-ULTRA

ANT130-110-XY-ULTRA

60 mm

110 mmANT130-160-XY-ULTRA
160 mm±250 nm (±10 µin)±300 nm (±12 µin)±300 nm (±12 µin)

Resolution

1 nm (0.04 µin)

1 nm (0.04 µin)

1 nm (0.04 µin)

Repeatability (Bi-Directional)(1)±75 nm (±3 µin)

±75 nm (±3 µin)

±75 nm (±3 µin)

Repeatability (Uni-Directional)±25 nm (±1 µin)

±25 nm (±1 µin)

±25 nm (±1 µin)

Straightness(1)±250 nm (±10 µin)±300 nm (±12 µin)±300 nm (±12 µin)

Flatness(1)±1.0 µm (±40 µin)±1.0 µm (±40 µin)±1.0 µm (±40 µin)

Pitch

10 arc sec

12 arc sec

12 arc sec

Roll

10 arc sec

12 arc sec

12 arc sec

Yaw

5 arc sec

6 arc sec

6 arc sec

Orthogonality

1.0 arc sec

0.5 arc sec

0.5 arc sec

Maximum Speed

350 mm/s (14 in/s)(Upper Axis)

350 mm/s (14 in/s)(Upper Axis)

350 mm/s (14 in/s)(Upper Axis)

1 g - 10 m/s2
(No Load)(Upper Axis)

1 g - 10 m/s2
(No Load)(Upper Axis)

1 g - 10 m/s2
(No Load)(Upper Axis)

Maximum Acceleration

See graph for typical performance

Speed Stability

See graph for typical performance

Settling Time
In-Position Stability(2)Maximum Force (Continuous)
Load Capacity(3)Moving Mass

Horizontal<1 nm (<0.04 µin)

<1 nm (<0.04 µin)

23 N

23 N

<1 nm (<0.04 µin)
23 N

12.0 kg (26.5 lb)

12.0 kg (26.5 lb)

12.0 kg (26.5 lb)

Upper

1.5 kg (3.3 lb)

2.1 kg (4.6 lb)

2.1 kg (4.6 lb)

Lower

4.2 kg (9.2 lb)

5.7 kg (12.5 lb)

5.7 kg (12.5 lb)

7.4 kg (16.3 lb)

7.4 kg (16.3 lb)

5.5 kg (12.1 lb)

Stage Mass

Aluminum Body/Black Hardcoat Finish

Material

30,000 Hours

MTBF (Mean Time Between Failure)

Notes:
1. Certified with each stage.
2. In-Position Jitter listing is 3 sigma value.
3. Axis orientation for on-axis loading is listed.
• Specifications are for XY systems measured 25 mm above the tabletop. Consult factory for multi-axis or non-standard applications.
• -ULTRA requires the use of an Aerotech controller.

Electrical Specifications

ANT130-060-XY-ULTRA

ANT130-110-XY-ULTRA

Drive System

Brushless Linear Servomotor

Feedback

Noncontact Linear Encoder±40 VDC

Maximum Bus Voltage
Limit Switches

5 V, Normally Closed

Home Switch

Near Center

Recommended Controller

ANT130-060-XY-ULTRA

ANT130-110-XY-ULTRA

A3200

Npaq-MXR
Npaq MR-MXH
Ndrive ML-MXH

Ensemble

Epaq-MXH
Epaq MR-MXH
Ensemble ML-MXH

Soloist

Soloist ML-MXH

Multi-Axis

Single Axis

ANT130-160-XY-ULTRA

ANT130-160-XY-ULTRA

Notes:
1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within
0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech Application Engineering for more information.

52

www.aerotech.com

80

100.1560
Position Error (nm)

100

100.2

100.1
100.05
100
99.95
99.9

Step Size: 60 mm
Speed: 350 mm/s
Settle Spec: ±20 nm

40
20
0
20
40

99.85

60

99.8

80
100

99.75
20

15

10

5
0
5
Position (mm)

10

15

0

20

ANT130-060-XY-ULTRA velocity performance at 100 mm/s and 1
kg payload for the X (lower) axis. This outstanding speed stability
enhances most scanning or laser machining applications.

91125
Straightness Error (nm)1500

Position (nm)

7
6
5
4
3
2
1

200

400

600
800
Move Time (ms)

1000

1200

ANT130-060-XY-ULTRA step and settle performance at full traveland 1 kg payload for the X (lower) axis. Industry-best settling
times significantly improve throughput for most applications.

11
10
8

Standard
Ultra

750
375
0
375
750
1125

0
1
0

5

10

15

20
Time (s)

25

30

1500
80

35

ANT130-060-XY-ULTRA lower axis 1 nm step plot. Best-in-classresolution and exceptional in-position stability for large travel
stages.

Orthogonality (160) = -0.2 arc-sec

140
Yaw (arc sec)

120
100
80
100,000X Magnification

60
40
20
0
0

20

40

60
80 100 120
X Position (mm)

140

160

180

ANT130-060-XY-ULTRA orthogonality. The inset is magnified
100,000X for clarity. The ULTRA model orthogonality is a twentyfold improvement over the BASE model orthogonality.

60

40

20
0
20
Position (mm)

40

60

80

ANT130-160-XY straightness error comparison between the BASE
and ULTRA models shows a dramatic improvement in thisspecification.

180

Y Position (mm)← 318 ms Move and Settle

ANT130-XY-ULTRA Series

Velocity (mm/s)

100.25NANO Technology

ANT130-XY-ULTRA Series PERFORMANCE

7
6
5
4
3
2
1
0
1
2
3
4
5
6
7
30

20

10

0
10
Position (mm)2030

ANT130-060-XY-ULTRA Y (upper) axis yaw, five runs, bidirectional. Highly repeatable, lowest angular error over full travel.

www.aerotech.com

53

~16

ANT130-XY-ULTRA Series

NANO Technology

ANT130-XY-ULTRA DIMENSIONS

~220

25
12.7

D/2

19X M6X1.0
7.0
CENTER ON
CARRIAGE

C/2

25

50

6.8

75

8

DETAIL A
SCALE 2 : 5
MOUNTING HOLE TYP.

D/2

B/2
50
75
B/2

90

C/2

D/2

125

D/2

MODEL

A = STAGELENGTH

B = NOMINALTRAVELC = LIMITTRAVELD = HARDSTOPTRAVELE

ANT130-060-XY

180

60 X 60

66 X 66

75 X 7542

ANT130-110-XY

230

110 X 110

116 X 116

125 X 12567

ANT130-160-XY

280

160 X 160

166 X 166

175 X 175

92

130

A

85

A
E

120

90

1. 200130A

1. ANT130-110-XY AND ANT130-160-XY ONLY

54

www.aerotech.com

DIMENSIONS: MILLIMETERS

120

NANO Technology

ANT130-XY-ULTRA Mounting Plate DIMENSIONSB

STAGE MOUNTING
M6 x 1.0 THRU

D

E

F

G

A

H

C

ANT130-XY-ULTRA Series

120

BREADBOARD MOUNTING
M6 OR 1/4-20 BOLTC'BORE SLOT

15

90

130

DIMENSIONS: MILLIMETERS

www.aerotech.com

55

NANO Technology
ANT130-XY-ULTRA Series
56

ANT130-XY-ULTRA Series ORDERING INFORMATION
ANT130-XY-ULTRA Series Linear Stage
ANT130-XY-ULTRA
Aerotech nanotranslation crossed-roller linear positioner with 2D calibration
Linear Stage Travel
ANT130-060-XY-ULTRA
ANT130-110-XY-ULTRA
ANT130-160-XY-ULTRA

60 mm travel XY stage with linear motor and limits (high accuracy version)
110 mm travel XY stage with linear motor and limits (high accuracy version)
160 mm travel XY stage with linear motor and limits (high accuracy version)

Output Cable Connectors-25DU
Single 25-pin D connector (standard)-4DU-25DU
4-pin HPD and 25-pin D connectors
Note: -25DU single 25-pin connector option not valid for systems using bus voltages greater than 80 V
Options-MP

www.aerotech.com

Breadboard mounting plateMechanical-Bearing
Direct-Drive Rotary Stage

NANO Technology

nano Motion Technology

ANT95-R SeriesHigh resolution (0.01 arc sec)
ANT95-R SeriesHigh performance
Unlimited rotation
Outstanding error motion specifications
Excellent in-position stability
Multi-axis configurations
High dynamic performance

Introduction
The ANT95-R and ANT95-R-PLUS direct-drive rotary stages
are designed as part of Aerotech’s nano Motion Technology
product family. Our rotary stages offer unprecedented inposition stability (0.005 arc sec) and sub 0.01 arc-sec
incremental motion performance, and are offered in two
grades of accuracy.

and small-size performance capability for almost any nanomanufacturing or inspection application.

Dynamic Performance
In addition to the high precision levels, these systems offer
high dynamic performance and throughput ideal for disk drive
manufacture and test.

The ANT95-R stage series was designed to operate in a 24/7
manufacturing environment. Unlike other rotary devices, theANT95-R requires no periodic maintenance, assuring years oftrouble-free operation.

0.53
0.48

0.11
0.1

0.44

0.09

0.39
0.34

0.08
0.07

0.29

0.06

0.24

0.05

0.19

0.04

0.15
0.1

0.03
0.02

0.05

0.01

0

0

0.05

Position (arc sec)

Durability

The ANT95-R series is designed for compatibility and easy
integration with Aerotech’s ANT linear stage productofferings. Together these stages provide accuracy, stability,

Position (μrad)

Multi-Axis Capabilities

0.01
0

5

10
15
Time (sec)20

25

ANT95-R 0.01 arc sec step plot. Best-in-class resolution andexceptional in-position stability for unlimited rotation stages.

www.aerotech.com

57

NANO Technology
ANT95-R Series

ANT95-R/ANT95-R-PLUS Series SPECIFICATIONS
Mechanical
Specifications

ANT95-20-R ANT95-20-R-PLUS ANT95-180-R ANT95-180-R-PLUS ANT95-360-R ANT95-360-R-PLUS
20°

20°

180°

180°

±360° Continuous

Accuracy(1)10 arc sec

3 arc sec

10 arc sec

3 arc sec

10 arc sec

3 arc sec

Resolution

0.01 arc sec

0.01 arc sec

0.01 arc sec

0.01 arc sec

0.01 arc sec

0.01 arc sec

Repeatability(Bi-Directional)(1)

1.5 arc sec

1.5 arc sec

1.5 arc sec

1.5 arc sec

1.5 arc sec

1.5 arc sec

Repeatability(Uni-Directional)

0.5 arc sec

0.5 arc sec

0.5 arc sec

0.5 arc sec

0.5 arc sec

0.5 arc sec

Rotation Angle±360° Continuous

Tilt Error
MotionSynchronous

NA

NA

NA

NA

10 arc sec

10 arc sec

Asynchronous

NA

NA

NA

NA

3 arc sec

3 arc sec

Axial
Error
Motion(1)Synchronous

NA

NA

NA

NA

2 µm

2 µm

Asynchronous

NA

NA

NA

NA

0.5 µm

0.5 µmRadialError
Motion(1)Synchronous

NA

NA

NA

NA

3 µm

3 µm

Asynchronous

NA

NA

NA

NA

1 µm

1 µm

20 rpm20 rpm20 rpm20 rpm200 rpm

200 rpm

Maximum Speed
Maximum Acceleration

400 rad/s2

400 rad/s2

400 rad/s2

400 rad/s2

400 rad/s2

400 rad/s2

In-Position Stability(2)0.005 arc sec

0.005 arc sec

0.005 arc sec

0.005 arc sec

0.005 arc sec

0.005 arc sec

11 mm (0.433 in)

11 mm (0.433 in)

11 mm (0.433 in)

11 mm (0.433 in)

11 mm (0.433 in)

11 mm (0.433 in)

Aperture
Maximum Torque(Continuous)

0.2 Nm

0.2 Nm

0.2 Nm

0.2 Nm

0.2 Nm

0.2 NmAxial

2.0 kg (4.4 lb)

2.0 kg (4.4 lb)

2.0 kg (4.4 lb)

2.0 kg (4.4 lb)

2.0 kg (4.4 lb)

2.0 kg (4.4 lb)

Radial

1.5 kg (3.3 lb)

1.5 kg (3.3 lb)

1.5 kg (3.3 lb)

1.5 kg (3.3 lb)

1.5 kg (3.3 lb)

1.5 kg (3.3 lb)

Moment

2 Nm

2 Nm

2 Nm

2 Nm

2 Nm

2 Nm

Rotor Inertia (Unloaded)

0.00065 kg-m2

0.00065 kg-m2

0.00066 kg-m2

0.00066 kg-m2

0.00069 kg-m2

0.00069 kg-m2

Stage Mass

1.2 kg (2.6 lb)

1.2 kg (2.6 lb)

1.2 kg (2.6 lb)

1.2 kg (2.6 lb)

1.2 kg (2.6 lb)

1.2 kg (2.6 lb)

LoadCapacity(3)Aluminum Body/Black Hardcoat Finish

Material
MTBF (Mean Time
Between Failure)

30,000 Hours

Notes:
1. Certified with each stage. Requires the use of an Aerotech controller.
2. In-Position Jitter listing is 3 sigma value.
3. Axis orientation for on-axis loading is listed.
• Specifications are per axis, measured 25 mm above the tabletop. Consult factory for multi-axis or non-standard applications.
• All error motion specifications are measured at 60 rpm.
• For high speed operation, customer payload must be balanced to G1.0 per ISO 1940.

Electrical Specifications

ANT95-20-R
ANT95-20-R-PLUS

ANT95-180-R
ANT95-180-R-PLUS

Slotless, Brushless, Direct-Drive Rotary Motor

Drive System

Noncontact Rotary Encoder

Feedback±40 VDC

Maximum Bus Voltage
Limit Switches

5 V, Normally Closed

Home Switch

Near Center

Recommended Controller

ANT95-20-R
ANT95-20-R-PLUS

ANT95-180-R
ANT95-180-R-PLUS

A3200

Npaq MXR
Npaq MR-MXH
Ndrive ML-MXH

Ensemble

Epaq MXR
Epaq MR-MXH
Ensemble ML-MXH

Soloist

Soloist ML-MXH

Multi-Axis

Single Axis

ANT95-360-R
ANT95-360-R-PLUS

ANT95-360-R
ANT95-360-R-PLUS

Notes:
1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within
0.25ºC/24 hours. If this is not possible, alternate products are available. Please consult Aerotech Application Engineering for more information.

58

www.aerotech.com

5.8

1.2

3.9

0.8

1.9

0.4

0

0

1.9

0.4

3.9

0.8

5.8

1.2

7.7

90°
2 μm

Error (arc sec)

1.6

-2 μm

180°

1.6
0

100

200
Position (deg)

270°

300

0.004

0.015

0.003

0.010

0.002

0.005

0.001
0

0
0.005

0.001

0.010

0.002

0.015

0.003

0.020

0.004
0

2

4
Time (s)6

ANT95-R plot showing best-in-class in-position stability.

Synchronous = 0.6 µm
Asynchronous = 0.2 µm

ANT95-R axial error plot illustrating outstanding synchronous andasynchronous error motion performance.

90°
Position (arc sec)

Position (μrad)

ANT95-R-PLUS accuracy plot showing excellent accuracy and bidirectional positioning capability.

0.020

0°

ANT95-R Series

Error (μrad)

7.7

NANO Technology

ANT95-R/ANT95-R-PLUS Series PERFORMANCE

2 μm

-2 μm

180°

0°

270°

Synchronous = 1.9 µm
Asynchronous = 0.2 µm

ANT95-R radial error plot illustrating outstanding synchronous andasynchronous error motion performance.

www.aerotech.com

59NANO Technology
ANT95-R Series

ANT95-R/ANT95-R-PLUS DIMENSIONS60°
TYP

STAGE MOUNTING
8X
4.8 THRU ALL
813.5

50 B.C.

APERTURE+0.01311
075 B.C.
84
SQR

25PIN MOTOR / FEEDBACK CONNECTORHEIGHT = 26

75
SQR

42
TYP

2X

54

5.8 THRU ALL

37.5
TYP

40

68

~925
CABLE
LENGTH146
A
1/2 NORMALTRAVELCUSTOMER MOUNTING
3.0
12X M3X0.5 HELICOILEQUALLY SPACED ON B.C.

B
1/2 LIMITTRAVELC
1/2 HARDSTOPTRAVEL
99
49.5
TYP

42
21.5

50
TYP

15
100

100
DIMENSIONS: MILLIMETERS

60

www.aerotech.com

50.8
SQR

24.6
TYP

BREADBOARD MOUNTING PATTERN
4x M6 OR 1/4-20 SHCS C'BORE SLOTSSTAGE MOUNTING
4x M4x0.7 THRU

20 THRU

50
TYP

25
TYP

ANT95-R Series

100
SQR

50
SQR

75
SQR

12.5
TYP

NANO Technology

ANT95-R/ANT95-R-PLUS Mounting Plate DIMENSIONS10DIMENSIONS: MILLIMETERS

ANT95-R/ANT95-R-PLUS Series ORDERING INFORMATION
ANT95-R Series Rotary Stage
ANT95-R
Aerotech direct-drive rotary positioner
Rotary Stage Travel
ANT95-20-R
20° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder,optical limits, and hard stops
ANT95-20-R-PLUS
20° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder,optical limits, and hard stops (high accuracy version)
ANT95-180-R
180° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder,optical limits, and hard stops
ANT95-180-R-PLUS 180° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder,optical limits, and hard stops (high accuracy version)
ANT95-360-R
360° continuous rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary
encoder, and optical limits
ANT95-360-R-PLUS 360° continuous rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary
encoder, and optical limits (high accuracy version)
Options-MP
Breadboard mounting plate

www.aerotech.com

61

NANO Technology
ANT130-R Seriesnano Motion Technology

ANT130-R Series
Mechanical-Bearing
Direct-Drive Rotary Stage
High resolution (0.01 arc sec)
High performance
Unlimited rotation
Outstanding error motion specifications
Excellent in-position stability
Multi-axis configurations
High dynamic performance

The ANT130-R and ANT130-R-PLUS direct-drive rotary stages
are designed as part of Aerotech’s nano Motion Technology
product family. Our rotary stages offer unprecedented inposition stability (0.005 arc sec) and sub 0.01 arc-sec
incremental motion performance, and are offered in two
grades of accuracy.

Multi-Axis Capabilities

0.53
0.48

0.11
0.1

0.44

0.09

0.39
0.34

0.08
0.07

0.29

0.06

0.24

0.05

0.19

0.04

0.15
0.1

0.03
0.02

0.05

0.01

0

0

0.05

Position (arc sec)

Position (μrad)

The ANT130-R series is designed for compatibility and easy
integration with Aerotech’s ANT linear stage productofferings. Together these stages provide accuracy, stability,
and small-size performance capability for almost any nanomanufacturing or inspection application.

0.01
0

5

10
15
Time (sec)20

25

ANT130-R 0.01 arc sec step plot. Best-in-class resolution andexceptional in-position stability for unlimited rotation stages.
See additional performance graphs on the following pages.

62

www.aerotech.com

Dynamic Performance
In addition to the high precision levels, these systems offer
high dynamic performance and throughput ideal for disk drive
manufacture and test.

Durability
The ANT130-R stage series was designed to operate in a
24/7 manufacturing environment. Unlike other rotary devices,
the ANT130-R requires no periodic maintenance, assuring
years of trouble-free operation.

Mechanical
Specifications

ANT130-20-R ANT130-20-R-PLUS ANT130-180-R ANT130-180-R-PLUS ANT130-360-R ANT130-360-R-PLUS
20°

20°

180°

180°

±360° Continuous

Accuracy(1)10 arc sec

3 arc sec

10 arc sec

3 arc sec

10 arc sec

3 arc sec

Resolution

0.01 arc sec

0.01 arc sec

0.01 arc sec

0.01 arc sec

0.01 arc sec

0.01 arc sec

Repeatability(Bi-Directional)(1)

1.5 arc sec

1.5 arc sec

1.5 arc sec

1.5 arc sec

1.5 arc sec

1.5 arc sec

Repeatability(Uni-Directional)

Rotation Angle±360° Continuous

0.5 arc sec

0.5 arc sec

0.5 arc sec

0.5 arc sec

0.5 arc sec

Tilt Error
Motion

NA

NA

NA

NA

10 arc sec

10 arc sec

Asynchronous

NA

NA

NA

NA

3 arc sec

3 arc sec

Axial
Error
Motion(1)Synchronous

NA

NA

NA

NA

2 µm

2 µm

Asynchronous

NA

NA

NA

NA

0.5 µm

0.5 µmRadialError
Motion(1)Synchronous

NA

NA

NA

NA

3 µm

3 µm

Asynchronous

NA

NA

NA

NA

1 µm

1 µm

20 rpm20 rpm20 rpm20 rpm200 rpm

200 rpm

Maximum Speed
Maximum Acceleration

400 rad/s2

400 rad/s2

400 rad/s2

400 rad/s2

400 rad/s2

400 rad/s2

In-Position Stability(2)0.005 arc sec

0.005 arc sec

0.005 arc sec

0.005 arc sec

0.005 arc sec

0.005 arc sec

11 mm

11 mm

11 mm

11 mm

11 mm

11 mm

Aperture
Maximum Torque(Continuous)

0.2 Nm

0.2 Nm

0.2 Nm

0.2 Nm

0.2 Nm

0.2 NmAxial

3.0 kg (6.6 lb)

3.0 kg (6.6 lb)

3.0 kg (6.6 lb)

3.0 kg (6.6 lb)

3.0 kg (6.6 lb)

3.0 kg (6.6 lb)

Radial

2.0 kg (4.4 lb)

2.0 kg (4.4 lb)

2.0 kg (4.4 lb)

2.0 kg (4.4 lb)

2.0 kg (4.4 lb)

2.0 kg (4.4 lb)

Moment

3 Nm

3 Nm

3 Nm

3 Nm

3 Nm

3 Nm

Rotor Inertia (Unloaded)

0.001 kg-m2

0.001 kg-m2

0.001 kg-m2

0.001 kg-m2

0.0016 kg-m2

0.0016 kg-m2

Stage Mass

1.5 kg (3.3 lb)

1.5 kg (3.3 lb)

1.5 kg (3.3 lb)

1.5 kg (3.3 lb)

1.7 kg (3.74 lb)

1.7 kg (3.74 lb)

Load
Capacity(3)ANT130-R Series

0.5 arc sec

Synchronous

NANO Technology

ANT130-R/ANT130-R-PLUS Series SPECIFICATIONS

Aluminum Body/Black Hardcoat Finish

Material
MTBF (Mean Time
Between Failure)

30,000 Hours

Notes:
1. Certified with each stage. Requires the use of an Aerotech controller.
2. In-Position Jitter listing is 3 sigma value.
3. Axis orientation for on-axis loading is listed.
• Specifications are per axis, measured 25 mm above the tabletop. Consult factory for multi-axis or non-standard applications.
• All error motion specifications are measured at 60 rpm.
• For high speed operation, customer payload must be balanced to G1.0 per ISO 1940.

Electrical Specifications

ANT130-20-R
ANT130-20-R-PLUS

ANT130-180-R
ANT130-180-R-PLUS

Slotless, Brushless, Direct-Drive Rotary Motor

Drive System

Noncontact Rotary Encoder

Feedback±40 VDC

Maximum Bus Voltage
Limit Switches

5 V, Normally Closed

Home Switch

Near Center

Recommended Controller

ANT130-20-R
ANT130-20-R-PLUS

ANT130-180-R
ANT130-180-R-PLUS

A3200

Npaq MXR
Npaq MR-MXH
Ndrive ML-MXH

Ensemble

Epaq MXR
Epaq MR-MXH
Ensemble ML-MXH

Soloist

Soloist ML-MXH

Multi-Axis

Single Axis

ANT130-360-R
ANT130-360-R-PLUS

ANT130-360-R
ANT130-360-R-PLUS

Notes:
1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within
0.25ºC/24 hours. If this is not possible, alternate products are available. Please consult Aerotech Application Engineering for more information.

www.aerotech.com

63

6.0

1.2

4.5

0.9

3.0

0.6

1.5

0.3

0

0

1.5

0.3

3.0

0.6

4.5

0.9

6.0

90°
2 μm

Error (arc sec)

Error (μrad)

ANT130-R Series

NANO Technology

ANT130-R/ANT130-R-PLUS Series PERFORMANCE

-2 μm

180°

1.2
0

100

200
Position (deg)

270°

300

0.003

0.012

0.002

0.008

0.002

0.004

0.001
0

0
0.004

0.001

0.008

0.002

0.012

0.002

0.016

0.003
0

2

4
Time (s)6

ANT130-R plot showing best-in-class in-position stability.

64

www.aerotech.com

Synchronous = 0.5 µm
Asynchronous = 0.2 µm

ANT130-R axial error plot illustrating outstanding synchronous andasynchronous error motion performance.

90°
Position (arc sec)

Position (μrad)

ANT130-R-PLUS accuracy plots showing excellent accuracy andbi-directional positioning capability.

0.016

0°

2 μm

-2 μm

180°

0°

270°

Synchronous = 1.6 µm
Asynchronous = 0.3 µm

ANT130-R radial error plot illustrating outstanding synchronousand asynchronous error motion performance.

NANO Technology

ANT130-R/ANT130-R-PLUS DIMENSIONSC
1/2 HARDSTOPTRAVEL45°
TYP.

ANT130-R Series

B
1/2 LIMITTRAVELA
1/2 NOM.
TRAVELCUSTOMER MOUNTING
4.0
24x M4x0.7 HELICOILEQUALLY SPACED ON B.C.

50 B.C.

71 B.C.

APERTURE
11

25PIN MOTOR/FEEDBACK CONNECTORHEIGHT = 26
2X54

5.8 THRU

106 B.C

68

35.4
TYP

40

50
TYP
75
TYP

~925
CABLE LENGTH

146

120
60
TYP

CAPTIVE
STAGE MOUNTING
4x M6 SHCS
40

26

34

73
TYP

65
TYP

26
130

10
TYP

125

50

DIMENSIONS: MILLIMETERS

145

www.aerotech.com

65

102
4.00

STAGE MOUNTING
4x M6x1 THRU

100
50

ANT130-R Series

NANO Technology

ANT130-R/ANT130-R-PLUS Mounting Plate DIMENSIONS

50
145

100
73
TYP

102
4.00

125

51
2.00

25

20 THRU

10

50
51
2.00

BREADBOARD MOUNTING PATTERN
6x M6 OR 1/4-20 SHCS C'BORE SLOTS

65
TYP
130

DIMENSIONS: MILLIMETERS

ANT130-R/ANT130-R-PLUS Series ORDERING INFORMATION
ANT130-R Series Rotary Stage
ANT130-R
Aerotech direct-drive rotary positioner
Rotary Stage Travel
ANT130-20-R
20° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder,optical limits, and hard stops
ANT130-20-R-PLUS 20° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary encoder,optical limits, and hard stops (high accuracy version)
180° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary
ANT130-180-R
encoder, optical limits, and hard stops
ANT130-180-R-PLUS 180° rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy rotary
encoder, optical limits, and hard stops (high accuracy version)
ANT130-360-R
360° continuous rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy
rotary encoder, and optical limits
ANT130-360-R-PLUS 360° continuous rotation stage with slotless, brushless, direct-drive motor, direct-coupled high-accuracy
rotary encoder, and optical limits (high accuracy version)
Options-MP

66

Breadboard mounting plate

www.aerotech.com

nano Motion Technology

Mechanical-Bearing
Linear Motor Vertical Stage

ANT95-L-Z Series

Nanometer performance in a large travel
format (25 and 50 mm)

NANO Technology

ANT95-L-Z SeriesHigh resolution (2 nm), repeatability (75 nm),and accuracy (300 nm)
In-position stability of <2 nm
Anti-creep crossed-roller bearings
High dynamic performance

Aerotech’s ANT series stages are the world’s first nanometerlevel positioning systems with greater than 25 mm travel. The
ANT95-L-Z and ANT95-L-Z-PLUS crossed-roller stages are thebest-in-class in combining speed, accuracy, resolution,
repeatability, reliability, and size, and are offered in two
accuracy grades. As an evolution of the ANT stage family,
these linear stages exhibit enhanced motion performance overAerotech’s first generation ANT series.

Noncontact Direct-Drive
All of the original ANT series’ direct-drive advantages havebeen preserved in the ANT95-L-Z family. Only noncontact
direct-drive technology offers the robust, accurate, and highspeed positioning necessary for mass production of precision
devices. ANT95-L-Z stages utilize advanced direct-drive
technology pioneered by Aerotech to achieve the highest
level of positioning performance for high-precision positioning,disk-drive fabrication, fiber alignment, optical delay element
actuation, sensor testing, and scanning processes that demandsmooth and precise motion.
The ANT95-L-Z stages use a nearly frictionless counterbalancemechanism to maintain performance levels while minimizing
motor heating. The counterbalance is user-adjustable from 0
to 5 kg.

Flexible System Design
The ANT95-L-Z family has universal mounting and tabletop
patterns that allow for easy system integration. Two, three, ormore axes can be easily combined for flexible system designs
and multi-axis configurations.

System Characteristics
Outstanding accuracy, position repeatability, and in-position
stability require high system resolution. The ANT95-L-Z stage’s
industry-leading 2 nm minimum incremental step size provides
this high level of performance. Excellent in-position stability is
assisted by high-quality, anti-creep, crossed-roller bearings.
The stage offers virtually maintenance-free operation over thelife of the product. Aerotech’s direct-drive technology has nohysteresis or backlash, enabling accurate and repeatable
nanometer-scale motion.
22
20
18
16
Position (nm)Introduction

14
12
10
8
6
4
2
0
2
0

5

10

15
20
Time (s)25

30

ANT95-50-L-Z-PLUS 2 nm step plot with 100 Hz filter. Bestin-class resolution and exceptional in-position stability forlarge travel stages.

www.aerotech.com

67NANO Technology
ANT95-L-Z Series

ANT95-L-Z/ANT95-L-Z-PLUS Series SPECIFICATIONS
Mechanical
Specifications

ANT95-25-L-Z

TravelAccuracy(1)ANT95-25-L-Z-PLUS

ANT95-50-L-Z

ANT95-50-L-Z-PLUS

25 mm

25 mm

50 mm

50 mm

±4.0 µm (±160 µin)±300 nm (±12 µin)±4.0 µm (±160 µin)±300 nm (±12 µin)

Resolution

2 nm (0.08 µin)

2 nm (0.08 µin)

2 nm (0.08 µin)

2 nm (0.08 µin)

Repeatability (Bi-Directional)(1)±100 nm (±4 µin)

±75 nm (±3 µin)±100 nm (±4 µin)

±75 nm (±3 µin)

Repeatability (Uni-Directional)±50 nm (±2 µin)

±50 nm (±2 µin)

±50 nm (±2 µin)

±50 nm (±2 µin)

Straightness(1)±2.25 µm (±90 µin)±2.25 µm (±90 µin)±3.0 µm (±120 µin)±3.0 µm (±120 µin)

Flatness(1)±4.0 µm (±160 µin)±3.5 µm (±140 µin)±3.5 µm (±140 µin)±4.0 µm (±160 µin)

Pitch

10 arc sec

10 arc sec

10 arc sec

10 arc sec

Roll

10 arc sec

10 arc sec

10 arc sec

10 arc sec

5 arc sec

5 arc sec

5 arc sec

5 arc sec

200 mm/s (8 in/s)

200 mm/s (8 in/s)

200 mm/s (8 in/s)

200 mm/s (8 in/s)

Maximum Acceleration

1 g - 10 m/s2 (No Load)

1 g - 10 m/s2 (No Load)

1 g - 10 m/s2 (No Load)

1 g - 10 m/s2 (No Load)

In-Position Stability(2)<2 nm (<0.08 µin)

<2 nm (<0.08 µin)

<2 nm (<0.08 µin)

<2 nm (<0.08 µin)7.75 N

7.75 N

9.5 N

9.5 N

5.0 kg (11 lb)

5.0 kg (11 lb)

5.0 kg (11 lb)

5.0 kg (11 lb)

Moving Mass

0.46 kg (1.0 lb)

0.46 kg (1.0 lb)

0.52 kg (1.1 lb)

0.52 kg (1.1 lb)

Stage Mass

1.9 kg (4.3 lb)

1.9 kg (4.3 lb)

2.5 kg (5.5 lb)

2.5 kg (5.5 lb)

Yaw
Maximum Speed

Maximum Force (Continuous)
Load Capacity(3)VerticalAluminum Body/Black Hardcoat Finish

Material
MTBF (Mean Time
Between Failure)

30,000 Hours

Notes:
1. Certified with each stage.
2. In-Position Jitter listing is 3 sigma value.
3. Axis orientation for on-axis loading is listed.
• Specifications are per axis, measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard
applications.
• -PLUS requires the use of an Aerotech controller.

Electrical Specifications

ANT95-25-L-Z

ANT95-25-L-Z-PLUS

ANT95-50-L-Z

Drive System

Brushless Linear Servomotor

Feedback

Noncontact Linear Encoder±40 VDC

Maximum Bus Voltage
Limit Switches

5 V, Normally Closed

Home Switch

Near Center

Recommended Controller

ANT95-25-L-Z

ANT95-25-L-Z-PLUS

ANT95-50-L-Z

A3200

Npaq-MXR
Npaq MR-MXH
Ndrive ML-MXH

Ensemble

Epaq-MXH
Epaq MR-MXH
Ensemble ML-MXH

Soloist

Soloist ML-MXH

Multi-Axis

Single Axis

ANT95-50-L-Z-PLUS

ANT95-50-L-Z-PLUS

Notes:
1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within
0.25ºC/24 hours. If this is not possible, alternate products are available. Please consult Aerotech Application Engineering for more information.

68

www.aerotech.com

500

1000

400

750
Straightness Error (nm)

200
100
0
100
200
300

250
0
250
500
750

400
500

1000
10

5

0
Position (mm)510

ANT95-25-L-Z-PLUS accuracy and repeatability. This multiple test
run over an extended period of time shows the high level of systemaccuracy and repeatability.

7
6
5
4
3
2
1
0
1
2
3
4
5
6
7

10

20

10

0
Position (mm)1020

ANT95-50-L-Z-PLUS yaw, five runs, bi-directional. Highly
repeatable, minimal yaw error enhances system positioning
accuracy.

50Position (mm)510

ANT95-25-L-Z-PLUS straightness error, five runs, bi-directional.
Exceptional and highly repeatable – five times more accurate than
the stated specification.

Pitch (arc sec)

Yaw (arc sec)

500

ANT95-L-Z Series

Position Error (nm)300

NANO Technology

ANT95-L-Z/ANT95-L-Z-PLUS Series PERFORMANCE

7
6
5
4
3
2
1
0
1
2
3
4
5
6
7
20

10

0
Position (mm)1020

ANT95-50-L-Z-PLUS pitch, five runs, bi-directional. Excellent
repeatability/accuracy contribute to improved processing.

www.aerotech.com

69NANO Technology
ANT95-L-Z Series

ANT95-25-L-Z/ANT95-L-Z-PLUS DIMENSIONS
ANT95-25-L-Z/ANT95-25-L-Z-PLUS
14
1/2 HARDSTOPTRAVELDOWEL PIN MOUNTING
4.0
2X 4.0CUSTOMER MOUNTING
13X M4x0.7
4.0

12.5
1/2 NORMALTRAVEL
12.5
TYP

188
MAX

174

139

100

50

75

25 TYP

87
13
1/2 LIMITTRAVEL
625
TYP

4
COUNTERBALANCE AIR SUPPLY[6MM TUBE]

10
TYP

37.5

MOTOR / FEEDBACK
CABLE [EXIT EITHER SIDE]

75

STAGE MOUNTING
17X
4.8 THRU ALL[CLEARANCE FOR M4 SHCS]
94

33
77.5

12.5
TYP

123.5

25 TYP50

REGULATOR KNOB FOR
COUNTERBALANCE ADJUSTMENT

12.5
TYP

25
TYP
49.2

14
50

DIMENSIONS: MILLIMETERS

70

www.aerotech.com

98.4

NANO Technology

ANT95-50-L-Z/ANT95-50-L-Z-PLUS DIMENSIONS
ANT95-50-L-Z/ANT95-50-L-Z-PLUS
28
1/2 HARDSTOPTRAVELDOWEL PIN MOUNTING
4.0
2X 4.0

8.4
TYP

260
MAX

232

ANT95-L-Z Series

CUSTOMER MOUNTING
23X M4x0.7
4.025
1/2 NORMALTRAVEL

181
141.8

100

50

75

125

25 TYP

108

26
1/2 LIMITTRAVEL
6

4
COUNTERBALANCE AIR SUPPLY[6MM TUBE]

25
TYP

MOTOR / FEEDBACK
CABLE [EXIT EITHER SIDE]

10
TYP

37.5
75

STAGE MOUNTING
4.8 THRU ALL
17X[CLEARANCE FOR M4 SHCS]
94

33
12.5
TYP

77.5
123.5

25 TYP
50

12.5
TYP
REGULATOR KNOB FOR
COUNTERBALANCE ADJUSTMENTDIMENSIONS: MILLIMETERS

49.2

14
50
98.4

www.aerotech.com

71NANO Technology
ANT95-L-Z Series
72

ANT95-L-Z/ANT95-L-Z-PLUS Series ORDERING INFORMATION
ANT95-L-Z Series Vertical Stage
ANT95-L-Z/ANT95-L-Z-PLUS
Aerotech nanotranslation crossed-roller vertical positioner
Linear Stage Travel
ANT95-25-L-Z
25 mm (1 in) vertical travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output
linear encoder and limits
ANT95-25-L-Z-PLUS 25 mm (1 in) vertical travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output
linear encoder and limits (High Accuracy Version)
50 mm (2 in) vertical travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output
ANT95-50-L-Z
linear encoder and limits
ANT95-50-L-Z-PLUS 50 mm (2 in) vertical travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output
linear encoder and limits (High Accuracy Version)
Options-RH-LH

Right-hand cable exit
Left-hand cable exit

www.aerotech.com

nano Motion Technology

Mechanical-Bearing
Linear Motor Vertical Stage

ANT130-L-Z Series

Nanometer performance in a large travel
format (35 and 60 mm)

NANO Technology

ANT130-L-Z SeriesHigh resolution (2 nm), repeatability (75 nm),and accuracy (300 nm)
In-position stability of <2 nm
Anti-creep crossed-roller bearings
High dynamic performance

Aerotech’s ANT series stages are the world’s first nanometerlevel positioning systems with greater than 25 mm travel. The
ANT130-L-Z and ANT130-L-Z-PLUS crossed-roller stages are
the best-in-class in combining speed, accuracy, resolution,
repeatability, reliability, and size, and are offered in two
accuracy grades. As an evolution of the ANT stage family,
these linear stages exhibit enhanced motion performance overAerotech’s first generation ANT series.

Noncontact Direct-Drive
All of the original ANT series’ direct-drive advantages havebeen preserved in the ANT130-L-Z family. Only noncontact
direct-drive technology offers the robust, accurate, and highspeed positioning necessary for mass production of precision
devices. ANT130-L-Z stages utilize advanced direct-drive
technology pioneered by Aerotech to achieve the highest
level of positioning performance for high-precision positioning,disk-drive fabrication, fiber alignment, optical delay element
actuation, sensor testing, and scanning processes that demandsmooth and precise motion.
The ANT130-L-Z stages use a nearly frictionlesscounterbalance mechanism to maintain performance levels
while minimizing motor heating. The counterbalance is useradjustable from 0 to 10 kg.

more axes can be easily combined for flexible system designs
and multi-axis configurations.

System Characteristics
Outstanding accuracy, position repeatability, and in-position
stability require high system resolution. The ANT130-L-Z
stage’s industry-leading 2 nm minimum incremental step size
provides this high level of performance. Excellent in-position
stability is assisted by high-quality, anti-creep, crossed-roller
bearings. The stage offers virtually maintenance-free operation
over the life of the product. Aerotech’s direct-drive technology
has no hysteresis or backlash, enabling accurate andrepeatable nanometer-scale motion.
22
20
18
16
Position (nm)Introduction

14
12
10
8
6
4
2
0
2
0

5

10

15
20
Time (s)2530Flexible System Design
The ANT130-L-Z family has universal mounting and tabletop
patterns that allow for easy system integration. Two, three, or

ANT130-60-L-Z-PLUS 2 nm step plot with 100 Hz filter. Best-inclass resolution and exceptional in-position stability for large travel
stages.

www.aerotech.com

73NANO Technology
ANT130-L-Z Series

ANT130-L-Z/ANT130-L-Z-PLUS Series SPECIFICATIONS
Mechanical
Specifications

ANT130-035-L-Z ANT130-035-L-Z-PLUS ANT130-060-L-Z ANT130-060-L-Z-PLUS

TravelAccuracy(1)

35 mm

35 mm

60 mm

60 mm

±3 µm (±120 µin)±300 nm (±12 µin)

±3 µm (±120 µin)±300 nm (±12 µin)

Resolution

2 nm (0.08 µin)

2 nm (0.08 µin)

2 nm (0.08 µin)

2 nm (0.08 µin)

Repeatability (Bi-Directional)(1)±100 nm (±4 µin)

±75 nm (±3 µin)±100 nm (±4 µin)

±75 nm (±3 µin)

Repeatability (Uni-Directional)±50 nm (±2 µin)

±50 nm (±2 µin)

±50 nm (±2 µin)

±50 nm (±2 µin)

Straightness(1)±2.0 µm (±80 µin)±2.0 µm (±80 µin)±2.0 µm (±80 µin)±2.0 µm (±80 µin)

Flatness(1)±2.0 µm (±80 µin)±2.0 µm (±80 µin)±2.0 µm (±80 µin)±2.0 µm (±80 µin)

Pitch

10 arc sec

10 arc sec

10 arc sec

10 arc sec

Roll

10 arc sec

10 arc sec

10 arc sec

10 arc sec

5 arc sec

5 arc sec

5 arc sec

5 arc sec

200 mm/s (8 in/s)

200 mm/s (8 in/s)

200 mm/s (8 in/s)

200 mm/s (8 in/s)

Maximum Acceleration

1 g - 10 m/s2
(No Load)

1 g - 10 m/s2
(No Load)

1 g - 10 m/s2
(No Load)

1 g - 10 m/s2
(No Load)

In-Position Stability(2)<2 nm (<0.08 µin)

<2 nm (<0.08 µin)

<2 nm (<0.08 µin)

<2 nm (<0.08 µin)

23 N

23 N

23 N

23 N

10 kg (22 lb)

10 kg (22 lb)

10 kg (22 lb)

10 kg (22 lb)

Yaw
Maximum Speed

Maximum Force (Continuous)
Load Capacity(3)VerticalMoving Mass

1.2 kg (2.6 lb)

1.2 kg (2.6 lb)

1.4 kg (3.1 lb)

1.4 kg (3.1 lb)

Stage Mass

4.3 kg (9.6 lb)

4.3 kg (9.6 lb)

5.2 kg (11.5 lb)

5.2 kg (11.5 lb)

Aluminum Body/Black Hardcoat Finish

Material
MTBF (Mean Time
Between Failure)

30,000 Hours

Notes:
1. Certified with each stage.
2. In-Position Jitter listing is 3 sigma value.
3. Axis orientation for on-axis loading is listed.
• Specifications are per axis, measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard
applications.
• -PLUS requires the use of an Aerotech controller.

Electrical
Specifications

ANT130-035-L-Z ANT130-035-L-Z-PLUS ANT130-060-L-Z ANT130-060-L-Z-PLUS

Drive System

Brushless Linear Servomotor

Feedback

Noncontact Linear Encoder±40 VDC

Maximum Bus Voltage
Limit Switches

5 V, Normally Closed

Home Switch

Near Center

Recommended
Controller

ANT130-035-L-Z ANT130-035-L-Z-PLUS ANT130-060-L-Z ANT130-060-L-Z-PLUS

A3200

Npaq-MXR
Npaq MR-MXH
Ndrive ML-MXH

Ensemble

Epaq-MXH
Epaq MR-MXH
Ensemble ML-MXH

Soloist

Soloist ML-MXH

Multi-Axis

Single Axis

Notes:
1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within
0.25ºC/24 hours. If this is not possible, alternate products are available. Please consult Aerotech Application Engineering for more information.

74

www.aerotech.com

500

1500
1250

400
Straightness Error (nm)

200
100
0
100
200
300

500
250
0
250
500
750
1250

20

10

0
10
Position (mm)

20

30

1500
30

20

10

0
10
Position (mm)20

ANT130-060-L-Z-PLUS yaw, five runs, bi-directional. Highly
repeatable, minimal yaw error enhances system positioning
accuracy.

30

20

10

0
10
Position (mm)2030

ANT130-060-L-Z-PLUS straightness error, five runs, bi-directional.
Exceptional and highly repeatable performance is assured withminimal straightness error.

Pitch (arc sec)

ANT130-060-L-Z-PLUS accuracy and repeatability, five runs, bidirectional over an extended period of time shows the high level ofsystem accuracy and repeatability.

Yaw (arc sec)

750

1000

400

7
6
5
4
3
2
1
0
1
2
3
4
5
6
7
30

1000

7
6
5
4
3
2
1
0
1
2
3
4
5
6
7
30

20

10

0
10
Position (mm)20

ANT130-L-Z Series

Position Error (nm)

300

500
30

NANO Technology

ANT130-L-Z/ANT130-L-Z-PLUS Series PERFORMANCE30

ANT130-060-L-Z-PLUS pitch, five runs, bi-directional. Excellent
repeatability/accuracy contribute to improved processing.

www.aerotech.com

75

A
1/2 HARDSTOPTRAVEL

120
75
SQ
50
B
1/2 NORMALTRAVELANT130-L-Z Series

NANO Technology

ANT130-L-Z/ANT130-L-Z-PLUS DIMENSIONS

37.5
TYP

50
SQ

H
D
MAX

E

90

125

F
J
G

K
C
1/2 LIMITTRAVEL
15

24
COUNTERBALANCE AIR SUPPLY[6MM TUBE]

65

CUSTOMER MOUNTING
921X M6x1.0[CENTERED ON CARRIAGE

130

130

45
95
146.6
50
SQ

STAGE MOUNTING
6.6 THRU ALL
9X[CLEARANCE FOR M6 SHCS]REGULATOR KNOB FOR
COUNTERBALANCE ADJUSTMENT

101.6

25
TYP
66.7
133.4
MOTOR / FEEDBACK
CABLE EXIT LOCATIONDIMENSIONS: MILLIMETERS

76

www.aerotech.com

ANT130-L-Z Series Vertical Stage
ANT130-L-Z
Aerotech nanotranslation crossed-roller vertical positioner
Linear Stage Travel
ANT130-035-L-Z
ANT130-035-L-Z-PLUS

ANT130-060-L-Z-PLUS

Options-25DU-4DU-25DU

Single 25-pin D (standard)
Motor 4-pin HPD; feedback 25-pin D

www.aerotech.com

ANT130-L-Z Series

ANT130-060-L-Z

35 mm vertical travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output
linear encoder and limits
35 mm vertical travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output
linear encoder and limits (High Accuracy Version)
60 mm vertical travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output
linear encoder and limits
60 mm vertical travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output
linear encoder and limits (High Accuracy Version)

NANO Technology

ANT130-L-Z/ANT130-L-Z-PLUS Series ORDERING INFORMATION

77

NANO Technology
ANT95-V Series

ANT95-V Seriesnano Motion Technology

Mechanical-Bearing
Linear Motor Lift Stage
Nanometer performance with
3 mm vertical travel
High resolution (1 nm), repeatability (100 nm),and accuracy (200 nm)
In-position stability of <1 nm
Anti-creep crossed-roller bearings
High dynamic performance

Introduction

System Characteristics

Aerotech’s ANT series stages are the world’s first nanometerlevel positioning systems with multi-millimeter travel. The
ANT95-V and ANT95-V-PLUS are linear-motor-driven wedgestyle vertical lift stages. The stages are designed to beseamlessly integrated with other stages in the ANT95 family
for superior multi-axis performance, and are offered in two
accuracy grades.

Outstanding accuracy, position repeatability, and in-position
stability require high system resolution. The ANT95-V stage’s
industry-leading 1 nm minimum incremental step size provides
this high level of performance. Excellent in-position stability is
assisted by high-quality, anti-creep, crossed-roller bearings.
The stage offers virtually maintenance-free operation over thelife of the product. Aerotech’s direct-drive technology has nohysteresis or backlash, enabling accurate and repeatable
nanometer-scale motion.

All of the original ANT series’ direct-drive advantages havebeen preserved in the ANT95-V family. Only noncontact
direct-drive technology offers the robust, accurate, and highspeed positioning necessary for mass production of precision
devices. ANT95-V stages utilize advanced direct-drive
technology pioneered by Aerotech to achieve the highest
level of positioning performance. This direct-drive technology
is high-performance, non-cogging, noncontact, high-speed,
high-resolution, and high-accuracy. This unique drive andbearing combination, packaged in an extremely small-profileand footprint, offers tangible advantages in many applications
such as high-precision positioning, disk-drive fabrication, fiberalignment, optical delay element actuation, sensor testing, andscanning processes that demand smooth and precise motion.

11
10
9
8
7
6

Position (nm)Noncontact Direct-Drive

5
4
3
2
1
0

Flexible System Design
The ANT95-V family has universal mounting and tabletop
patterns that allow for easy system integration. Two, three, ormore axes can be combined easily for flexible system designs
and multi-axis configurations.

78

www.aerotech.com

1
0

5

10

15
20
Time (s)25

30

ANT95-3-V-PLUS 1 nm step plot. Best-in-class resolution andexceptional in-position stability for large travel stages.

Mechanical Specifications

ANT95-3-V

ANT95-3-V-PLUS
3 mm

TravelAccuracy(1)±2 µm (±80 µin)±200 nm (±8 µin)
1 nm (0.04 µin)

Resolution
Repeatability (Bi-Directional)(1)±150 nm (±6 µin)±100 nm (±4 µin)

Repeatability (Uni-Directional)±75 nm (±3 µin)

Straightness(2)±1.0 µm (±40 µin)
20 arc sec

Roll(1)

10 arc sec

Yaw(1)

ANT95-V Series

Pitch(1)

10 arc sec
75 mm/s (3 in/s)

Maximum Speed

0.4 g - 4 m/s2 (No Load)

Maximum Acceleration

See graphs for typical performance

Settling Time
In-Position Stability(3)NANO Technology

ANT95-V/ANT95-V-PLUS Series SPECIFICATIONS<1 nm (<0.04 µin)
71 N

Maximum Force (Continuous)
Load Capacity(4)1.5 kg (3.3 lb)

Moving Mass

1.1 kg (2.42 lb)
2.0 kg (4.4 lb)

Stage Mass

Aluminum and Stainless-Steel Body/Black Hardcoat Finish/Black Anodize Finish

Material
MTBF (Mean Time Between Failure)

30,000 Hours

Notes:
1. Certified with each stage.
2. Measured perpendicular or parallel to wedge direction.
3. In-Position Stability listing is 3 sigma value.
4. Assumes loading along axis of travel.
• Specifications are per axis, measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard
applications.
• -PLUS requires the use of an Aerotech controller.

Electrical Specifications

ANT95-3-V

Drive System

Brushless Linear Servomotor

Feedback

Noncontact Linear Encoder±40 VDC

Maximum Bus Voltage
Limit Switches

5 V, Normally Closed

Home Switch

Near Center

Recommended Controller
A3200

Npaq-MXR
Npaq MR-MXH
Ndrive ML-MXH

Ensemble

Epaq-MXH
Epaq MR-MXH
Ensemble ML-MXH

Soloist

Soloist ML-MXH

Multi-Axis

Single Axis

ANT95-3-V

Notes:
1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within
0.25ºC/24 hours. If this is not possible, alternate products are available. Please consult Aerotech Application Engineering for more information.

www.aerotech.com

79

1500
1250

1500
1250

1000

1000

Straightness Error (nm)Straightness Error (nm)NANO Technology
ANT95-V Series

ANT95-V/ANT95-V-PLUS Series PERFORMANCE

750
500
250
0
250
500
750

500
750
1000
1250

1

0.5

0
0.5
Position (mm)

1

1500
1.5

1.5

500

100

400

80

300

60

200
100
0
100
200
300

0.5

0
0.5
Position (mm)1

1.5

← 121 ms Move and Settle

40
20
0
20
40
60

400

80

500
1.5

100

1

0.5

0
0.5
Position (mm)11.5

ANT95-3-V-PLUS accuracy and repeatability. This multiple test run
over an extended period of time shows the high level of systemaccuracy and repeatability.

0

8

6

6

4

4

Pitch (arc sec)

10

8

2
0
2
4

0

4
6
8

0
0.5
Position (mm)11.5

ANT95-3-V-PLUS yaw, five runs, bi-directional. Highly repeatable,
minimal yaw error enhances system positioning accuracy.

www.aerotech.com

200

2

8
0.5

100
150
Move Time (ms)

2

6

1

50

ANT95-3-V-PLUS step and settle performance at 75 mm/s, witha settle spec of ±20 nm, and a step size of 3 mm. Outstanding
settling time enhances throughput of most applications.

10

10
1.5

1

ANT95-3-V-PLUS straightness error, five runs, bi-directional,
perpendicular to the wedge.

Position Error (nm)Position Error (nm)

0
250

1250
1500
1.5

Yaw (arc sec)

500
250

1000

ANT95-3-V-PLUS straightness error, five runs, bi-directional,
parallel to the wedge.

80

750

10
1.5

1

0.5

0
0.5
Position (mm)1

ANT95-3-V-PLUS pitch, five runs, bi-directional. Excellent
repeatability/accuracy contribute to improved processing.

1.5

NANO Technology

ANT95-3-V/ANT95-3-V-PLUS DIMENSIONSCABLE EXIT
APPROX. 1 M LONG
61

ANT95-V Series

25 TYP108

9X M4X0.7

6.0

25 TYP2
1/2 MECH. LIMIT TRAVEL
1.7
1/2 ELEC. LIMIT TRAVEL
1.5
1/2 NOMINAL TRAVELWEDGE DIRECTION

50
CENTER OF
TRAVEL

37.5
75

5.3 TYP

46.5

62.5
MOUNTING HOLES
4X
4.6 THRU ALL

93.6

11.8
125
141.5

DIMENSIONS: MILLIMETERS

8.9

www.aerotech.com

81

75.0
50.0

ANT95-V Series

NANO Technology

ANT95-3-V/ANT95-3-V-PLUS Mounting Plate DIMENSIONS

125.0

100.0

76.2
3.00

STAGE MOUNTING
8X M4x0.7 THRU

75.0

50.8
2.00
95.0

7.0
C'BORE
DEPTH

100.0

141.8

BREADBOARD MOUNTING
4X M6 OR 1/4-20 BOLTC'BORE SLOT

10.0

DIMENSIONS: MILLIMETERS

ANT95-V/ANT95-V-PLUS Series ORDERING INFORMATION
ANT95-V Series Lift Stage
ANT95-V/ANT95-V-PLUS Aerotech nanotranslation crossed-roller bearing vertical lift positioner
Linear Stage Travel
ANT95-3-V
3 mm vertical travel lift stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits
ANT95-3-V-PLUS
3 mm vertical travel lift stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits (High Accuracy Version)
Options-MP

82

Breadboard mounting plate

www.aerotech.com

nano Motion Technology

Mechanical-Bearing
Linear Motor Lift Stage

ANT130-V Series

Nanometer performance with
5 mm vertical travel

NANO Technology

ANT130-V SeriesHigh resolution (2 nm), repeatability (100 nm),and accuracy (200 nm)
In-position stability of <2 nm
Anti-creep crossed-roller bearings
High dynamic performance

Introduction

System Characteristics

Aerotech’s ANT series stages are the world’s first nanometerlevel positioning systems with multi-millimeter travel. The
ANT130-V and ANT130-V-PLUS are linear-motor-driven
wedge-style vertical lift stages. The stages are designed to beseamlessly integrated with other stages in the ANT130 family
for superior multi-axis performance, and are offered in two
accuracy grades.

Outstanding accuracy, position repeatability, and in-position
stability require high system resolution. The ANT130-V stage’s
industry-leading 2 nm minimum incremental step size provides
this high level of performance. Excellent in-position stability is
assisted by high-quality, anti-creep, crossed-roller bearings.
The stage offers virtually maintenance-free operation over thelife of the product. Aerotech’s direct-drive technology has nohysteresis or backlash, enabling accurate and repeatable
nanometer-scale motion.

All of the original ANT series’ direct-drive advantages havebeen preserved in the ANT130-V family. Only noncontact
direct-drive technology offers the robust, accurate, and highspeed positioning necessary for mass production of precision
devices. ANT130-V stages utilize advanced direct-drive
technology pioneered by Aerotech to achieve the highest
level of positioning performance. This direct-drive technology
is high-performance, non-cogging, noncontact, high-speed,
high-resolution, and high-accuracy. This unique drive andbearing combination, packaged in an extremely small-profileand footprint, offers tangible advantages in many applications
such as high-precision positioning, disk-drive fabrication, fiberalignment, optical delay element actuation, sensor testing, andscanning processes that demand smooth and precise motion.

Flexible System Design
The ANT130-V family has universal mounting and tabletop
patterns that allow for easy system integration. Two, three, ormore axes can be combined easily for flexible system designs
and multi-axis configurations.

22
20
18
16
Position (nm)Noncontact Direct-Drive Design

14
12
10
8
6
4
2
0
2
0

5

10

15
20
Time (s)25

30

ANT130-5-V-PLUS 2 nm step plot. Best-in-class resolution andexceptional in-position stability for large travel stages.

www.aerotech.com

83NANO Technology
ANT130-V Series

ANT130-V/ANT130-V-PLUS Series SPECIFICATIONS
Mechanical Specifications

ANT130-5-V

ANT130-5-V-PLUS
5 mm

TravelAccuracy(1)±2 µm (± 80 µin)±200 nm (± 8 µin)
2 nm (± 0.08 µin)

Resolution
Repeatability (Bi-Directional)(1)±150 nm (± 6 µin)±100 nm (± 4 µin)

Repeatability (Uni-Directional)±75 nm (± 3 µin)

Straightness(2)±1.0 µm (±40 µin)

Pitch(1)20 arc sec

Roll

10 arc sec

Yaw(1)

10 arc sec
75 mm/s (3 in/s)

Maximum Speed

0.7 g - 7 m/s2 (No Load)

Maximum Acceleration

See graphs for typical performance

Settling Time
In-Position Stability(3)<2 nm (<0.08 µin)
100 N

Maximum Force (Continuous)
Load Capacity(4)3.0 kg (6.6 lb)

Moving Mass

1.8 kg (4 lb)

Stage Mass

3.1 kg (7 lb)
Aluminum Body/Black Hardcoat Finish/Black Anodize Finish

Material
MTBF (Mean Time Between Failure)

30,000 Hours

Notes:
1. Certified with each stage.
2. Measured perpendicular or parallel to wedge direction.
3. In-Position Stability listing is 3 sigma value.
4. Assumes loading along axis of travel.
• Specifications are per axis, measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard
applications.
• -PLUS requires the use of an Aerotech controller.

Electrical Specifications

ANT130-5-V

Drive System

Brushless Linear Servomotor

Feedback

Noncontact Linear Encoder±40 VDC

Maximum Bus Voltage
Limit Switches

5 V, Normally Closed

Home Switch

Near Center

Recommended Controller
A3200

Npaq-MXR
Npaq MR-MXH
Ndrive ML-MXH

Ensemble

Epaq-MXH
Epaq MR-MXH
Ensemble ML-MXH

Soloist

Soloist ML-MXH

Multi-Axis

Single Axis

ANT130-5-V

Notes:
1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within
0.25ºC/24 hours. If this is not possible, alternate products are available. Please consult Aerotech Application Engineering for more information.

84

www.aerotech.com

1000

1000

Straightness Error (nm)

1500
1250

750
500
250
0
250
500
750
1000

0
250
500
750
1250

1500
3

2

1

0
1
Position (mm)

2

1500

3

ANT130-5-V-PLUS straightness error, five runs, bi-directional,
parallel to the wedge.

3

2

1

0
1
Position (mm)2

3

ANT130-5-V-PLUS straightness error, five runs, bi-directional,
perpendicular to the wedge.

500

100

400

80

300

← 129 ms Move and Settle

60
Position Error (nm)Position Error (nm)

500
250

1000

1250

200
100
0
100
200
300

40
20
0
20
40
60

400

80

500
3

2

1

0
1
Position (mm)

2

100

3

ANT130-5-V-PLUS accuracy and repeatability. This multiple test
run over an extended period of time shows the high level of systemaccuracy and repeatability.

0

10

10

8

8

6

6

4

4

2
0
2
4

0
1
Position (mm)2

ANT130-5-V-PLUS yaw, five runs, bi-directional. Highly
repeatable, minimal yaw error enhances system positioning
accuracy.

3

600

4

8
1

500

0

6

2

300
400
Move Time (ms)

2

8
3

200

2

6

10

100

ANT130-5-V-PLUS step and settle performance at 75 mm/s, witha settle spec of ±20 nm, and a step size of 5 mm. Outstanding
settling time enhances throughput of most applications.

Pitch (arc sec)

Yaw (arc sec)

750

ANT130-V Series

Straightness Error (nm)

1500
1250

NANO Technology

ANT130-V/ANT130-V-PLUS Series PERFORMANCE

10
3

2

1

0
1
Position (mm)2

3

ANT130-5-V-PLUS pitch, five runs, bi-directional. Excellent
repeatability/accuracy contribute to improved processing.

www.aerotech.com

85

NANO Technology
ANT130-V Series

ANT130-5-V/ANT130-5-V-PLUS DIMENSIONS

126.6
16

CABLE EXIT
APPROX. 1 M LONG

42.3

108

25 TYP
9X M6X1.0
25 TYP
94

9.0

70.5
1/2 MECHANICALTRAVEL
70.2
1/2 ELECTRICALTRAVEL70
1/2 NOMINALTRAVEL

WEDGE DIRECTION
60

62.5

67.5
CENTER OF
TRAVEL

25
45

2 TYP

50
90
126.6

120

MOUNTING HOLES
50 MM X 125 MM PATTERN
6.6 THRU ALL
MOUNTING HOLES
90 MM X 120 MM PATTERN
6.6 THRU ALL
DIMENSIONS: MILLIMETERS

86

www.aerotech.com

125
156.6

26.3
26.2

STAGE MOUNTING
M6 x 1.0 THRU

100

101.6
50

BREADBOARD MOUNTING
M6 OR 1/4-20 BOLTC'BORE SLOT

155

155

50.8 REF

ANT130-V Series

120

7
C'BORE

101.6

NANO Technology

ANT130-5-V/ANT130-5-V-PLUS Mounting Plate DIMENSIONS

90
15

100
130
DIMENSIONS: MILLIMETERS

ANT130-V/ANT130-V-PLUS Series ORDERING INFORMATION
ANT130-V Series Lift Stage
ANT130-V/ANT130-V-PLUS

Aerotech nanotranslation crossed-roller bearing vertical lift positioner

Linear Stage Travel
ANT130-5-V
5 mm vertical travel lift stage with proprietary direct-drive motor technology,
1 Vp-p sinusoidal output linear encoder and limits
ANT130-5-V-PLUS
5 mm vertical travel lift stage with proprietary direct-drive motor technology,
1 Vp-p sinusoidal output linear encoder and limits (High Accuracy Version)
Output Cable Connectors-25DU
Single 25-pin D connector (standard)-4DU-25DU
4-pin HPD and 25-pin D connectors
Note: -25DU single 25-pin connector option not valid for systems using bus voltages greater than 80 V
Options-MP

Breadboard mounting plate

www.aerotech.com

87NANO Technology
ANT-20G Series

ANT-20G Seriesnano Motion Technology

Direct-Drive Goniometers

Noncontact, non-cogging, frictionless directdrive for zero backlash or hysteresis
High speed (150°/s)
High resolution (0.05 arc second)
Excellent in-position stability
Large 20° rotation angle

Compact design

Aerotech’s ANT-20G goniometers represent a significant
breakthrough in the high-accuracy angular alignment ofcomponents. This unique design utilizes Aerotech’s best-inclass direct-drive noncontact motor technology. When usedwith Aerotech’s controllers, the ANT-20G series provides anindustry-leading positioning speed of 150 degrees per
second.
High-precision bearings, direct on-axis encoder feedback, andnoncontact and noncogging direct-drive technology assure
the highest level of performance and make excellent
repeatability and in-position stability a reality. The goniometer
cradles can be mounted orthogonally to provide pitch and rollabout the same point in space. Combining this with a rotarystage under the orthogonal assembly adds a third rotation
axis (pitch, roll, yaw) through the same point.
The critical elements of the ANT-20G goniometers, as with allother ANT series nanopositioners, were selected to operate ina 24/7 manufacturing environment. Unlike worm- or piezodriven goniometers, the ANT-20G series will not require
periodic adjustment or maintenance. This will assure many
years of trouble-free operation. The ANT-20G cradles areavailable in four sizes.

88

www.aerotech.com

U.S. Patent No. 6,442,851

ANT-20G-90 0.25 µrad or 0.05 arc sec step size

2.25

0.45

2.0

0.4

1.75

0.35

1.5

0.3

1.25

0.25

1.0

0.2

0.75

0.15

0.5

0.1

0.25

Position (arc sec)

No maintenance

Clockwise from upper
left: ANT-20G-50
mounted in an
orthogonal configuration
with an ANT-20G-90,
ANT-20G-110, and an
ANT-20G-160.

Position (µrad)

Orthogonal mounting of two cradles
provides rotation about the same point

0.05

0

0

-0.25

-0.05
0

5

10

15
Time (s)20

25

ANT-20G-90 step plot. Best-in-class resolution and exceptional inposition stability for large angular travel stages.

Mechanical Specifications

ANT-20G-50

ANT-20G-90

20°

20°

Accuracy(1)±90 µrad (±18 arc sec)

±50 µrad (±10 arc sec)

Resolution

0.25 µrad (0.05 arc sec)

0.25 µrad (0.05 arc sec)

Repeatability (Bi-Directional)(1)±18 µrad (±4 arc-sec)±10 µrad (±2 arc-sec)

Repeatability (Uni-Directional)±5 µrad (±1 arc-sec)±5 µrad (±1 arc-sec)

Tilt Error Motion±90 µrad (±18 arc sec)

±50 µrad (±10 arc sec)

Rotation Angle

1200 rad/s2

Maximum Acceleration

500 rad/s2
See graph for typical performance

Settling Time
In-Position Stability(2)±0.4 µrad (±0.08 arc sec)

±0.2 µrad (±0.04 arc sec)

Nominal Radius of Rotation

50 mm

90 mm

Height from Tabletop to Rotation Point

19.1 mm57.5 mm0.40 N-m

0.85 N-m

Maximum Torque (Continuous)
Load Capacity

Axial

1.5 kg

2.0 kgMoment

60 kg-mm

80 kg-mm0.55 kg (1.2 lb)

Stage Mass

ANT-20G Series

150 degrees per second

Maximum Speed

NANO Technology

ANT-20G Series SPECIFICATIONS

1.1 kg (2.4 lb)
AluminumMaterial

30,000 Hours

MTBF (Mean Time Between Failure)

Notes:
1. Certified with each stage.
2. In-Position Jitter listing is 3 sigma value.
• Specifications are per axis, measured at the rotation point. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard
applications.

Mechanical Specifications

ANT-20G-110

ANT-20G-160

20°

20°

Accuracy(1)±40 µrad (±8 arc sec)

±30 µrad (±6 arc sec)

Resolution

0.25 µrad (0.05 arc sec)

0.25 µrad (0.05 arc sec)

Repeatability (Bi-Directional)(1)±10 µrad (±2 arc-sec)±10 µrad (±2 arc-sec)

Repeatability (Uni-Directional)±5 µrad (±1 arc-sec)±5 µrad (±1 arc-sec)

Tilt Error Motion±40 µrad (±8 arc sec)

±30 µrad (±6 arc sec)

Rotation Angle

150 degrees per second

Maximum Speed
375 rad/s2

Maximum Acceleration

250 rad/s2
See graph for typical performance

Settling Time
In-Position Stability(2)±0.2 µrad (±0.04 arc sec)

±0.15 µrad (±0.03 arc sec)

Nominal Radius of Rotation

110 mm

160 mmHeight from Tabletop to Rotation Point

76.2 mm

120.4 mm1.00 N-m

2.40 N-m

Maximum Torque (Continuous)
Load Capacity
Stage Mass
Material
MTBF (Mean Time Between Failure)

Axial

2.0 kg

3.5 kgMoment

80 kg-mm

140 kg-mm

1.2 kg (2.6 lb)

1.6 kg (3.5 lb)
Aluminum
30,000 Hours

Notes:
1. Certified with each stage.
2. In-Position Jitter listing is 3 sigma value.
• Specifications are per axis, measured at the rotation point. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard
applications.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within
0.25ºC/24 hours. If this is not possible, alternate products are available. Please consult Aerotech Application Engineering for more information.

www.aerotech.com

89

NANO Technology
ANT-20G Series

ANT-20G Series SPECIFICATIONSElectrical Specifications

ANT-20G-50

ANT-20G-90

ANT-20G-110

ANT-20G-160

Slotless, Brushless, Direct-Drive

Drive System

Noncontact Encoder

Feedback±40 VDC

Maximum Bus Voltage
Limit Switches

5 V, Normally Closed

Home Switch

Near Center

Recommended Controller

ANT-20G-50

ANT-20G-90

A3200

Ensemble

Epaq-MXH
Epaq MR-MXH
Ensemble ML-MXH

Soloist

Soloist ML-MXH

Multi-Axis

Single Axis

ANT-20G-110

Npaq-MXR
Npaq MR-MXH
Ndrive ML-MXH

ANT-20G-160

60

12

40

8

20

4

0

0

20

-4

40

-8

60

-12

80

-16

100
10

-20
10

5

0
Position (deg)

5

2

0.4

Position Error (μrad)← 158 ms Move and Settle

0.2

0

0

1

0.2

2

0.4

3

0.6

4

0.8

5

1
0

100

200

300
400
500
Move Time (ms)600

www.aerotech.com

0.03

0.1
0.05

0.02
0.01
0

0
-0.05

-0.01

-0.1
-0.15

-0.02
-0.03

-0.2

-0.04

-0.25

-0.05
-0.06
1

2

3
Time (s)

4

10.0°

0°

5

10.0°

3.5 arc seconds

3.5 arc seconds

700

ANT-20G-90 step and settle performance. Outstanding
settling time enhances throughput of most applications.

90

0.04

0

Position Error (arc sec)

3

1

0.2
0.15

ANT-20G-90 in-position stability. Excellent in-position stability is
another feature of the ANT Series goniometers.

1
Step Size: 20°
0.8
Speed: 150 °/s
Settle Spec: ±.25 arc sec 0.6

4

0.06
0.05

-0.3

ANT-20G-90 accuracy, five runs, bi-directional, uncalibrated,shows the high level of system accuracy.

5

0.3
0.25

ANT-20G-90 tilt error motion performance.

Position (arc sec)

16

Position (µrad)2080
Accuracy Error (μrad)100

Accuracy Error (arc sec)

Notes:
1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

NANO Technology

ANT-20G DIMENSIONS
ANT-20G-50
U.S. Patent No. 6,442,851
All stages shown at center of rotation angle.
Mounting surface quality: Flatness = 5 µm [0.0002 in.]ANT-20G Series

www.aerotech.com

91

ANT-20G-90
U.S. Patent No. 6,442,851
All stages shown at center of rotation angle.
Mounting surface quality: Flatness = 5 µm [0.0002 in.]ANT-20G Series

NANO Technology

ANT-20G DIMENSIONS

ANT-20G-50-90

U.S. Patent No. 6,442,851
All stages shown at center of rotation angle. Mounting surface quality: Flatness = 5 µm [0.0002 in.]92

www.aerotech.com

NANO Technology

ANT-20G DIMENSIONS
ANT-20G-110
U.S. Patent No. 6,442,851
All stages shown at center of rotation angle.
Mounting surface quality: Flatness = 5 µm [0.0002 in.]ANT-20G Series

www.aerotech.com

93

ANT-20G-160
U.S. Patent No. 6,442,851
All stages shown at center of rotation angle.
Mounting surface quality: Flatness = 5 µm [0.0002 in.]ANT-20G Series

NANO Technology

ANT-20G DIMENSIONS

ANT-20G-110-160

U.S. Patent No. 6,442,851
All stages shown at center of rotation angle. Mounting surface quality: Flatness = 5 µm [0.0002 in.]94

www.aerotech.com

www.aerotech.com

ANT-20G Series

ANT-20G Series Goniometer
ANT-20G-50
20 degree angle of rotation goniometer with proprietary direct-drive motor technology,
50 mm radius of rotation, limits, 1 Vpp sinusoidal encoder, 1 meter cable, 25 D connector
ANT-20G-90
20 degree angle of rotation goniometer with proprietary direct-drive motor technology,
90 mm radius of rotation, limits, 1 Vpp sinusoidal encoder, 1 meter cable, 25 D connector
20 degree angle of rotation goniometer with proprietary direct-drive motor technology,
ANT-20G-110
110 mm radius of rotation, limits, 1 Vpp sinusoidal encoder, 1 meter cable, 25 D connector
ANT-20G-160
20 degree angle of rotation goniometer with proprietary direct-drive motor technology,
160 mm radius of rotation, limits, 1 Vpp sinusoidal encoder, 1 meter cable, 25 D connector

NANO Technology

ANT-20G Series ORDERING INFORMATION

95

NANO Technology
Controls

Nano Motion Control Systems
Aerotech Nano Motion Control Systems are designed
specifically for nanometer positioning over long travels. Eachof the key controller technologies – linear amplifiers, highprecision multiplier feedback electronics, and dynamic
trajectory management – are all essential to achieving
nanometer motion. While the technology used to make a one
nanometer step is complex, the Aerotech software, Motion
Composer, makes the system setup, debug, andcommissioning easy.

SoftwareUse the libraries and example code to
develop your own front-end andapplications with .NET, C#, C, andLabVIEW®.
• Easy setup with calculators andautotune routine• Use state-of-the-art Integrated
Development Environment (IDE) todevelop your motion program• Second-to-none diagnostics toolkit• Conditional 2D error plotting

Automation 3200

• Software-based machine controller• 1 to 32 axes of coordinated motion• Up to 32 tasks• PC-based• AeroBasicTM programming language• Linear power stage

Ensemble• Advanced features for demanding
applications• Stand-alone 1- to
10-axis controller• Discrete or rackmount• Versatile, cost-effective,
coordinated motion• X65536 interpolation• Sub-nanometer resolution• Analog and digital I/O• Up to 4 tasks• Linear power stage

Integrated Development Environment

Programming Interface

96

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Autotune

Loop Transmission

NANO Technology

Dynamic Controls Toolbox

Controls

Harmonic Cancellation
Directional Gain Scheduling
Command Shaping

Soloist• Desktop or panel mount• Sub-nanometer resolution• AeroBasicTM programming language• X65536 interpolation• Elegant,economical,
single-axis controller• AeroBasicTM programming language• X65536 interpolation• Stand-alone• Linear power stage• Analog and digital I/O• Sub-nanometer resolution• Analog and digital I/OParameter Editor

Encoder Tuning

www.aerotech.com

97

NANO Technology
Controls

Nano Motion Control System Components
The ability to perform 1 nm moves requires a tightly integrated
motion control system. The more stringent the specifications asystem must meet, the more tightly the components must be
integrated. While the challenge of achieving 1 nm steps witha complete Aerotech system is not trivial, the challenge ofachieving 1 nm steps with a system made up of components
from multiple suppliers is extremely difficult, if not impossible.

A3200

The following sections briefly describe these key components.
Additional detail can be found in later pages.

Ensemble

The A3200 controller is capable of synchronous motion for
up to 32 axes. This PC based controller utilizes a distributed
architecture to communicate with drives across a high-speed
deterministic network. With all of the high-speed loop closure(position and current) done on the drives, performance does
not degrade as axes are added.

The Ensemble controller is capable of synchronous motion for
up to 10 axes. This stand-alone controller utilizes a masternode to coordinate the motion across the slave axes. Each of
the slave axes connect to the master through a high-speed
Aeronet bus to ensure synchronization across the axes. The
PC is only required for initial setup.

Controller Type
Aerotech offers three different controller families:• Automation 3200 (A3200)• Ensemble• Soloist

SoloistThe Soloist is a stand-alone, single-axis controller. For those
applications that do not require synchronous motion, theSoloist is ideal. Like the Ensemble, the Soloist requires a PC
only for initial setup. The tables that follow show a comparison
between the three different controller families.

Though the performance is identical between each of theseproducts, each has unique features that are suitable todifferent applications.

Basic Functions

A3200

Ensemble

SoloistMulti-Axis

Up to 32 axes coordinated

Up to 10 axes coordinatedSingle axis

Architecture

PC-based software controllerStand-alone

Stand-alone

Up to 32

4

4Number of Tasks

98

CNC Functionality/RS-274◊

Coordinated Motion◊◊

Point-to-Point Motion◊◊

Cutter Compensation◊

Multi-Block Look-Ahead◊

Acceleration Limiting/Look-Ahead◊

Gantry Mode◊◊

Velocity Blending

◊

◊

◊

Electronic Gearing

◊

◊

◊

Electronic Cam Profiling

◊

◊

◊

Arbitrary Path Generation

◊

◊

◊

Jog and Offset/Jog and Return◊

Velocity Profiling

◊

◊

◊

Retrace (Block by Block)◊

Axis Calibration

◊

◊

◊

3D Error Mapping◊

Sinusoidal Commutation

◊

◊

◊

Analog Power Control

◊

◊

◊

Servo, Stepper, or DC Motor Controller

◊

◊

◊

Expanded I/O Available

◊

◊

◊

Encoder Tuning

◊

◊

◊

Dual Loop Control

◊

◊

◊

www.aerotech.com◊

3rd Party Software

Aerotech’s Integrated Development Environment (IDE) is asuite of software tools that serves as the primary interface
between the user and their system. Regardless of the controller
chosen (A3200, Ensemble, or Soloist), the tools are the same.
The IDE consists of the following elements:

For those users wishing to integrate the controller products into
their software module, Aerotech offers a variety of different
interfaces to the most common development environments.
These include:• Microsoft .NET 2.0• LabVIEW®
• EPICS•CPower Electronics
The power electronics needed to perform these 1 nm steps
require the use of high-performance linear amplifiers with low
noise interpolation electronics. The power electronics arepackaged as discrete amplifiers (ML Series), 19” rack mount(Npaq) or desktop unit (Epaq). The performance of each ofthese products is identical.

Controls• Motion Composer• Configuration Manager• Digital Scope- Servo Tuning- Loop Transmission- Dynamic Controls Toolbox- Encoder Tuning- Enhanced Throughput Module• Motion Designer• Diagnostics• User Interface• Dynamic Calibration Management System

NANO Technology

Integrated Development Environment

Aerotech has spent over 40 years perfecting each of thesetools to deliver the highest performing motion system. From the
trajectory generator to our tuning screen, Aerotech’s focus has
been on pushing the technology and performance of its
products. Each of these tools is covered in more detail on thefollowing pages.

Advanced Functions

A3200

Ensemble

Soloist◊◊◊.NET/AeroBasic

◊

◊

◊

Fast Position Capture

◊

◊

◊

High-Speed Registration

◊

◊

◊

On the Fly End-Point Modification

◊

◊

◊

Orthogonality Correction

◊

◊

◊

Parts Rotation◊

Intra-Block Retrace

◊

IDE
TM

Iterative Learning Control

◊

◊

◊

Yes; Up to 3 axes

Yes; Up to 3 axes

Yes

Harmonic Cancellation

◊

◊

◊

Direction Gain Scheduling

◊

◊

◊

Inertial Damping

◊

◊

◊

Friction Compensation◊

Linear Drive Amplifiers

◊

◊

◊

Machine Retrofit Hardware Available◊

Galvo Integration◊

Seven-Segment Acceleration Profile

◊

◊

◊

Slice Move◊

Corner Rounding◊

Coordinate Transformations◊

With plug-in

Kinematics◊

With plug-in

Loop Transmission

◊

◊

◊

Advanced Diagnostics and Tuning

◊

◊

◊

Auto Focus◊

PSO

www.aerotech.com

99

NANO Technology
Controls

Motion Composer
Development Environment
for all Aerotech Controllers
Motion Composer
Easy to use with extensive diagnostic tools,
digital scope, and status utility
Shortens development time and includes
multiple languages for development
Flexibility – use with any Aerotech
controller: A3200, Ensemble, or Soloist

Introduction
Aerotech’s latest motion controller release focuses on ease ofuse for the programmer, shortens development times
compared with other tools, and provides the flexibility to use
the tools or controller most familiar to programmers. A
complete Integrated Development Environment (IDE) and acomprehensive .NET motion library provide classes formotion, I/O, status, and diagnostic information. Program in
Visual Studio and use the .NET library, or use the Motion
Composer to develop code with English-style commands or G
code. A LabVIEW® VI library is available for NI users, while acomplete C library is available for those using VB6, C++, orC.

Configuration Manager

Motion Composer Suite
The Motion Composer Suite includes the Motion Composer
IDE, Digital Scope Configuration Manager, Console, Status
Utility, and Firmware Loader. Optional modules include the
CNC Operator’s Interface, Motion Designer, Dynamic
Controls Toolbox, and Enhanced Throughput Module. The
Motion Composer Suite can be used with the Aerotech
A3200, Ensemble, or Soloist controllers, and the features andbenefits of each module are summarized below.

Key Function of Each Module
The Motion Composer is an environment for developing anddebugging AeroBasic programs for Aerotech controllers, andalso functions as a simple operator's interface for thedeveloper. The Motion Composer can be used to perform thefollowing tasks:• Write and debug programs – use breakpoint, step into,
step over, colorized programming, and standard program
control (start, stop, pause, compile, etc.)• Program flow control – If constructs, Looping constructs,
Subroutines, Command basic motion• Inspect diagnostic information• Perform basic configuration
100

www.aerotech.com

Use the Configuration Manager to modify parameter files andset the active parameter file, as well as connection settingsand program automation. All parameters are explained in the
integrated Help File and presented in an organized tree
structure. A variety of calculators are provided to make setup
quick and easy.

NANO Technology

Motion Composer DESCRIPTION
Motion Composer Specifications
Standard Motion Composer Suite
Motion Composer

Develop and debug programs, jog axis, and view status

Configuration Manager

Edit parameters and change system settings

Digital Scope

Collect and analyze data

ConsoleCommand line interface for low level hardware debugging
Debugging tool for status of drive signals, limits, inputs, halls, encoders, and more
Utility to update hardware/firmware

Optional Motion Composer Modules
Motion Designer

Graphically generate motion profiles for execution on controller

CNC Operator Interface

Run programs, jog axis, view status and operate machine. Included in the CNC option (A3200 only)

Controls

System Diagnostics
LoaderOptional Controller Modules
Dynamic Controls Toolbox

Control algorithms that increase system performance: settle time, accuracy, in-position stability,
and/or velocity stability

Enhanced Throughput Module

Improves machine throughput by compensating for the effect of frame vibration on tooltip

Fiber Optic

Power band search used to align fiberoptic devices (A3200 only)

Nmark VCT and GRC

Provides integrated support for galvo laser system control (A3200 only)

CNC Option

Standard RS-274D or G and M code programming language (A3200 only)

Digital Scope

The Digital Scope is a system analysis and tuning applicationthat allows the user to optimize system performance using acollection of advanced tuning tools and features. Systemanalysis tools allow plotting and graphical analysis of systemdata, while tuning tools provide automatic calculation of servo
loop and feedback device parameters.

The Digital Scope application includes a variety of utilities thatallow the user to perform analysis and tuning operations
including:• Collecting and plotting various signals including position,
velocity, and position error on multiple axes
• Viewing multiple overlapped one-dimensional and twodimensional plots• Graphically examining collected data using cursor andzooming tools• Executing motion commands while collecting data
• Computing the discrete Fourier transform of any of thecollected signals to identify system characteristics• Automatically tuning the servo loop to achieve the desired
system performance using the Autotune feature• Calculating and enabling multiple digital filters to improvesystem performance• Performing loop transmissions on each axis that allow
advanced analysis and optimization of servo-loop tuning andperformance• Automatically tune an amplified sine encoder feedback
device and view the results• Conditional plotting to configure plots collected in the
Digital Scope to display data differently based on input fromthe controller• Data collected from an axis can be set to display as a

www.aerotech.com

101

NANO Technology
Controls

Motion Composer Series DESCRIPTION
different color, or not display at all, based on the state of thecontroller’s digital outputs and inputs. This is very useful whenplotting tooltip trajectories during cutting or machining times.
• Data collected during run can be plotted and each line
segment is linked to the program line generating thecommand. This makes increasing the throughput of themachine very easy on a line-by-line basis rather than justslowing down the entire process.

signals including the axes’ hardware limits, drive enables,
drive faults, probe input, Hall effect, and encoder feedback
signals.

Help Files

Operator Interface

The Operator Interface provides a traditional CNC look andfeel for operating a machine running G code. The interface
provides a multi-axis readout with position, velocity shown inuser units, immediate command, MFO, program scan duringexecution, modal status, and a multi-axis jog screen. Typicalcycle start, stop, feedhold, and system stop buttons areincluded. The operator can open and load a new program,
watch status, and manually control the machine. All buttons
are designed for use with a touchscreen or a mouse.

Status Utility
Help files are separated into the Motion Composer Suite
programming Help file and the .NET and C library Help files.
This limits the amount of unnecessary information to readwhen developing in one environment. Only licensed softwaremodules are shown in the Help file to provide clarity for theuser.

The Status Utility is a debugging tool that graphically displays
the status of all 32 axes and all controller tasks. Use this for
initial machine setup and testing. It displays the state of drive
102

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Enhanced Throughput Module (ETM)

They Dynamic Controls Toolbox provides control algorithms
that increase system performance such as settle time,
accuracy, in-position stability, and/or velocity stability. These
include Harmonic Cancellation, Threshold and Dynamic Gain
Scheduling. Harmonic Cancellation includes a set ofcontroller-level algorithms that are designed to improve
performance by reducing the tracking error due to sinusoidal
reference commands, motor force ripple (or other positiondependent disturbances), and cross-axis disturbances such as
those created in a linear axis by an unbalanced rotational
axis.

The ETM improves machine throughput by compensating forthe effect of frame vibration on the tooltip. It provides forprefiltering input signals where necessary, and is available forsingle- or multi-axis operations.

Controls

Optional Motion Composer Modules –Dynamic Controls Toolbox

NANO Technology

Motion Composer Series DESCRIPTION

Threshold Gain Scheduling is a controller-level algorithm that
adjusts the servo-loop gains based on a specific input: current
or velocity either commanded or feedback. Two thresholdzones are available.
The Dynamic Gain Scheduling algorithm can improve position
performance and reduce cycle times. The algorithm changes
the PID gains based on the servo error vector.

.NET Library Classes
AeroBasic Class

Compile AeroBasic programs and get build errors

Controller Class

Provides access to the different features of the controller and ability to configure the controller

Commands Class

Execute AeroBasic commands in .NET

Configuration Class

Configure A3200 system settings (for Ensemble and Soloist this is done using parameters)

DataCollection Class

Collect data on the controller in real time; Exposes functionality used by the Digital Scope

FileSystem Class

Control the file system on the Ensemble and Soloist controllers

Parameters Class

Access parameters on the controller and to handle data in parameter files

Status Class

Get status and monitor information coming from the controller

Tasks Class

Handle tasks and AeroBasic programs they are running

www.aerotech.com

103Motion Designer

Controls

NANO Technology

Motion Composer Series DESCRIPTION

Motion Designer is used to graphically generate and edit
motion profiles that execute on the controller, providing theability to import, run, and evaluate motion profiles(trajectories). Motion Designer complements the Digital Scopetuning and data analysis application. Motion Designer
features include:• Importing an existing trajectory consisting of position,
velocity, and/or acceleration state vectors from an externalfile• Plotting trajectories and using analysis tools such as cursors
and frequency domain estimation• Creating and modifying trajectories using predefinedbuilding blocks• Running a trajectory and plotting collected data
• Overlapping multiple runs of a trajectory• Creating and exporting an AeroBasic program from anexisting trajectory• Reducing position error between runs by using learningalgorithms• Creating and running multi-axis trajectories

Learning Control
Learning Control can be applied to the trajectory in Motion
Designer to minimize the position error based on successive
runs of the same move.

104

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NANO Technology

ML Series
Digital Servo Amplifiers – Linear
Output power range of 10 A peak with ±10
to ±40 VDC bus

Controls

DC input
CE approval
Linear power stages
Digital current, velocity, and position loops
for improved motion stability

From left to right: Ndrive ML, Ensemble ML, and Soloist ML.

Integrated encoder multiplier for higher
throughput and reduced wiring
Single- or multi-axis control
PC-based or stand-alone

The ML family of digital servo amplifiers is a collectionof high performance discrete drives used with theAutomation 3200, Ensemble, and Soloist motion
controllers. Based on a common architecture, theseamplifiers perform both current- and position-loop
closures digitally.

The ML family includes several versions of low noise,ultra-high-performance linear drives. The ML drive
provides high bandwidth and superb linearity required
for the ultimate in velocity regulation as well as
positional stability. It provides the highest level of
encoder interpolation.

The use of high-performance double-precision
processors allows these drives to generate ultra-smooth
motion profiles. Servo system response is optimized
with the use of up to eight second-order loop-shaping
filters, precise time-aligned feed-forward and otherproprietary techniques with loop closure rates up to
20 kHz.

Options for the ML family include integral encoderinterpolation, one- or two-axis position synchronizedoutput (PSO), automatic brake control, digital andanalog IO expansion.

www.aerotech.com

105

NANO Technology
Controls

Ndrive ML/Ensemble ML/Soloist ML SPECIFICATIONSML Drives

Units

Motor Style

Ensemble ML

Soloist ML

Brush, Brushless, Stepper,
Voice CoilBrush, Brushless, Stepper,
Voice Coil

Motor Supply

VDC±40 max±40 max±40 max

Control Supply(1)VDC

18-36 VDC

18-36 VDC

18-36 VDCBus Voltage(2)

VDC

±40

±40

±40

Peak Output Current (1 sec)(3,4)

Apk

10

10

10

Continuous Output Current(3,4)

Apk

5

5

5

Digital Inputs

—

N/A

N/A

N/A

Digital Outputs

—

N/A

N/A

N/A

Analog Inputs—

One 16-bit Differential; ±10V

One 16-bit Differential; ±10V

One 16-bit Differential; ±10V

Analog Outputs—

Dedicated Axis I/O on Feedback
Connector

Dedicated I/O on Auxiliary Feedback
Connector

I/O Expansion Board(5)

—

N/A

N/A

N/A

Three Limit Inputs (CW,
CCW, Home); Three Hall
Effect Inputs (A, B, C); Three
High-Speed differential
Inputs (sin, cos, mkr for
encoder); Motor OverTemperature Input

Three Limit Inputs (CW,
CCW, Home); Three Hall
Effect Inputs (A, B, C); Three
High-Speed differential
Inputs (sin, cos, mkr for
encoder); Motor OverTemperature Input

Three Limit Inputs (CW,
CCW, Home); Three Hall
Effect Inputs (A, B, C); Three
High-Speed differential
Inputs (sin, cos, mkr for
encoder); Motor OverTemperature Input

sin, cos, mkr for Aux Enc;
Aux Enc can be used for
PSO Output

sin, cos, mkr for Aux Enc;
Aux Enc can be used for
PSO Output

sin, cos, mkr for Aux Enc;
Aux Enc can be used for
PSO Output

8/8 Digital Opto-Isolated; 1
Analog In (±10 V, 16-bit
Differential); 1 Analog Out(±5 V, 16-bit)

8/8 Digital Opto-Isolated; 1
Analog In (±10 V, 16-bit
Differential); 1 Analog Out(±5 V, 16-bit)

8/8 Digital Opto-Isolated; 1
Analog In (±10 V, 16-bit
Differential); 1 Analog Out(±5 V, 16-bit)
Yes (50 ns Latency)

Yes (50 ns Latency)

Yes (50 ns Latency)—

Optional

Optional

Optional

Emergency Stop Sense Input (ESTOP)(6)—Standard;
24 V Opto-IsolatedStandard;
24 V Opto-IsolatedStandard;
24 V Opto-Isolated

Position Synchronized Output—

Single Axis Only

Single Axis Only

Single Axis Only

Yes (MXH Only)

Yes (MXH Only)

Yes (MXH Only)

Can Output Square Wave Encoder

Yes

Yes

Yes

Primary Encoder Input Frequency

32 MHz Square Wave
Standard; 2 MHz Sine Wave
(MXU or MXH)

32 MHz Square Wave
Standard; 2 MHz Sine Wave
(MXU or MXH)

32 MHz Square Wave
Standard; 2 MHz Sine Wave
(MXU or MXH)

High Speed Data Capture
Automatic Brake Control

Can Output Multiplied Encoder

Secondary Encoder Input Frequency

32 MHz Square Wave

32 MHz Square Wave

32 MHz Square Wave

Up to x4096 (MXU); Up tox65536 with Quadrature
Output (MXH)

Up to x4096 (MXU); Up tox65536 with Quadrature
Output (MXH)

Encoder Multiplication—

Up to x4096 (MXU); Up tox65536 with Quadrature
Output (MXH)

Resolver Interface

—

N/A

N/A

N/A

Internal Shunt Resistor

N/A

N/A

N/A

External Shunt

N/A

N/A

N/A

N/A

N/A

N/A

USB

No

No

No

RS-232No

No

No

FireWire

Yes

Yes

Yes

Ethernet—

Modbus TCP on PC

Modbus TCP; Ethernet/IP

Modbus TCP; Ethernet/IP

Current Loop Update Rate

kHz

20

20

20

Servo Loop Update Rate

kHz

8

8

8

Power Amplifier Bandwidth

kHz

Selectable Through Software

Selectable Through Software

Selectable Through Software

Minimum Load Inductance

mH

0

0

0

Operating Temperature°C

0 to 50

0 to 50

0 to 50

Fieldbus

Storage Temperature
Weight°C-30 to 85-30 to 85-30 to 85

kg (lb)0.45 (1.0)

0.45 (1.0)

0.45 (1.0)

Notes:
1. "Keep Alive" supply.
2. Output voltage is load dependent.
3. Peak value of the sine wave; rms current for AC motors is 0.707 * Apk.
4. Load dependent.
5. Requires IO option.
6. Requires external relay to remove motor supply power.

106

Ndrive ML
Brush, Brushless, Stepper,
Voice Coilwww.aerotech.com

NANO Technology

Ndrive ML/Ensemble ML/Soloist ML DIMENSIONS
ML with Optional IO(Dimensions without optional IO are identical)

Controls

Ndrive ML, Ensemble ML, and Soloist ML share the same dimensions.

www.aerotech.com

107NANO Technology
Controls

Npaq Series
Drive Racks for Nanometer Motion
3U plug-in drives or integral drives
19 inch rack-mount design
Linear power stage
Integral power supplies
IEEE-1394 FireWire® interface
Digital current, velocity and position loops
for improved motion stability

Npaq

Optional Ethernet for I/O expansion
UL and CE approval
EN954-1 compliant
Integrated encoder multiplier for higher
throughput and reduced wiring

Npaq MRThe Npaq is the high performance rack-mountable servo
amplifier solution for the Automation 3200 motion system. The
Npaq can control up to six axes of motion using a variety ofplug-in amplifiers. The Npaq performs both current loop andservo-loop closure to ensure the highest level of positioning
accuracy and rate stability.
The Npaq is built on a high-performance DSP that allows it toperform complex calculations in real time. It is this processing
capability that allows the Npaq to provide loop closure rates
up to 20 kHz, and to handle both digital and analog I/O,
laser firing, and encoder multiplication.

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Two independent supplies provide bus voltage to theamplifiers and may be configured to allow different bus
voltages for different motors operating from the same Npaq.
In order to provide the capability for increased I/O counts for
PLC-type applications, the Npaq has an optional dedicated
Ethernet port to communicate with I/O modules from thirdparty vendors.
Standard options for the Npaq include on-board encoder
multiplication (up to x65536), three-axis position
synchronized output (PSO), brake control logic, shunt
regulator, external fan tray, and emergency stop relays.

Optional
Emergency Stop
Optional
Analog I/O

Communication
ChannelNumbers

User I/O

NANO Technology

Npaq Series COMPONENTS

Controls

FireWire
Optional Ethernet Interface

AC Power Input
Motor Output(6 through 1)

Encoder Feedback
Channel (Axis 6
through Axis 1)

Npaq Series PLUG-IN DRIVES

Amplifiers

DL4010Control Type

Brushless, DC Brush, Stepper
LinearOutput Type

10-40 (Bipolar)

Output Voltage (VDC)
Continuous Current

5(1)Peak Current

10(1)Minimum Load(2)Protection

0 ohmsShort Circuit Protection; Overload Protection; Low Level Power Supply Detection and Fuse

Switching Frequency

N/A

Notes:
1. Actual current ratings dependent on motor resistance
2. Minimum load is based on output voltage; 0.1 mH is minimum load at 160 VDC, 1.0 mH at 320 VDC

www.aerotech.com

109

NANO Technology
Controls

Npaq Series SPECIFICATIONS
Npaq

Npaq MR

Number of Axes

Units

1 to 6

1 to 8

Encoder Inputs

1 to 6; Additional Through High Speed
Input

1 Primary and 1 Auxiliary Per Axis

Power Supply

VAC

Single-Phase 100-240 VAC; 50/60 Hz (Factory Configured)

Bus Voltage

VDC

10-80

10-80

Peak Output Current (1 sec)(1)

Apk

10

10

Continuous Output Current(1)

Apk

5

5

Digital Inputs—

Eight Optically-Isolated

Optional(2)Digital Outputs—

Eight Optically-Isolated

Optional(2)Analog Inputs—

Four 16-bit Differential; ±1 V to ±10 V

One 12-bit Differential Per Axis

Analog Outputs—

Two 16-bit Single-Ended; ±10 V

Optional(2)Three Limit Inputs (CW, CCW, Home); Three Hall Effect Inputs (A, B, C); Three High-Speed
differential Inputs (sin, cos, mkr for encoder); Motor Over-Temperature Input

Dedicated Axis I/O on Feedback Connector
Dedicated I/O on Auxiliary Feedback
Connector

N/Asin, cos, mkr for Aux Enc; mkr can be used for PSO Output

Four Analog Input; Six Analog Output

One 12-bit Differential Analog Input; One 16-bit
Analog Output; Eight Digital Outputs, Optically
Isolated, Sinking or Sourcing; Eight OpticallyIsolated Digital Outputs per Axis

High Speed Data Capture

Four Differential Inputs (1 µs ResponseTime)

Yes(4)High Speed Digital Outputs

Six Differential Outputs

No

I/O Expansion Board(2)—3

Bi-Directional Lines
Automatic Brake Control—

Emergency Stop (ESTOP)—

Position Synchronized Output (PSO)

No
Optional
Optional

Single Axis Standard, Two/Three Axis
Optional—Yes

Can Output Multiplied Encoder

Only With MXH Option
Yes

Can Output Square Wave Encoder
Primary Encoder Input Frequency with
Multiplication

200 kHz sine wave (MXU);
450 kHz sine wave (MXH)

450 kHz or 2 MHz sine wave (MXH)

Primary Encoder Input Frequency – Square
Wave

10 MHz square wave frequency/40 MHz count rate
10 MHz square wave frequency/40 MHz count rate

Secondary Encoder Input Frequency
Laser Feedback Support

Yes

No

Encoder Multiplication(3)Up to x65536 With Quadrature Output(MXR)

x4096 (MXU); x65536 (MXH)

40 W Continuous; 400 W Peak (5 seconds)

No

Optional

No—

Internal Shunt Resistor
External Shunt
Ethernet—

Optional

No
No

USB
RS-232No

FireWire

Yes

Fieldbus

Modbus TCP on PC
Yes

Joystick
Current Loop Update RatekHz

Servo Loop Update Rate

kHzPower Amplifier Bandwidth

kHz

20
8

8
Selectable Through Software

Operating Temperature°C

0 to 50

Storage Temperature°C-30 to 85

Weightkg (lb)

Notes:
1. Peak value of the sine wave; rms current for AC motors is 0.707 * Apk.
2. Requires IO option.
3. Effective resolution after quadrature decoding if applicable.

110Single Axis Standard

www.aerotech.com

24 (55)16 (35)NANO Technology

Npaq Series DIMENSIONS

Controls

www.aerotech.com

111

NANO Technology
Controls

Npaq MR Series DIMENSIONS

112

www.aerotech.com

Stand-Alone, Multi-Axis Motion Controllers for Nanometer Motion
Up to eight integrated drives in one stand-alone
controller

NANO Technology

Ensemble™ Epaq and Epaq MR Series

Controls

Controller architecture capable of coordinating
motion of up to five independent tasks
Complete motion capabilities include: point-topoint, linear and circular interpolation,
electronic gearing, velocity profiling
Program in AeroBASICTM with the IDE,
Microsoft .NET including C#, VB.NET®,Managed C++, or LabVIEW®
Remote ASCII interface provided for Windows®
or non-Windows® programs (including Linux)
to command the Epaq through standard
Ethernet, RS-232 port, and optional IEEE-488
Advanced Windows®-based remotediagnostics, tuning, and programming interface
softwareFront panel display and control pad forconvenient menu-driven axis control and statuschecking
Axis jogging/control with optional joystick
Fully compatible with EPICS set of softwaretools and applications, making Ensemble ideal
for use in synchrotron and general laboratory
facilities

The EnsembleTM Epaq is Aerotech’s next-generation, standalone controller for moderate- to high-performance
applications. It offers functionality appropriate for applications
from basic laboratory experimentation and general purpose
positioning to advanced OEM systems at an affordable price.

Versatile, Stand-Alone, Multi-Axis Control
The Ensemble Epaq is offered in three versions: a 6-axis
desktop (rack-mount optional) version with display and jog
pad, as well as 4- and 8-axis 3U rack-mount versions. All
versions contain integrated power supplies and pluggable
motor and IO connectors. Linear amplifiers are available forhigh performance, low noise applications. Higher power
external amplifiers may be daisy-chained to the Epaq using
the high-speed AeroNet serial interface for a total of nine
axes of coordinated motion.
This flexible configuration style allows users to seamlessly mix
and match drive types (linear versus PWM, brush or brushless,stepper, etc.) within the same positioning system using acommon programming and control platform.
Multiple Epaqs can be controlled from one Windows® PC
through Ethernet or USB. Optional on-board encoderinterpolation offers the user programmable axis resolutionwww.aerotech.com

113

NANO Technology
Controls

Ensemble Epaq and Epaq MR DESCRIPTION(assuming a sine-wave encoder input signal), including theability to change interpolation (multiplication) values throughsoftware.

2-Axis
AMG100LP
Gimbal

6-Axis, Stand-Alone,
Rackmount or Desktop

Powerful and Intuitive Programming
Functionality

2-AxisAMG150LP
Gimbal

Unlike most controllers on the market today, there is no needto understand a cryptic command set to generate motion. The
intuitive interface allows a user to begin programming
immediately. Ensemble online help further simplifies writing
motion programs and includes many functional examples thatcan be easily modified for customer applications.

Ensemble Epaq

ENET

USB

RS-2322-Axis
AMG100LP
GimbalIEEE-488

The Ensemble with Integrated Development Environment
software offers a graphical user interface in Windows®,
featuring an intuitive Program Editor, Variable Output
window, Compiler Output window, and Task State monitor.
This interface enables users to easily monitor all aspects of
their positioning system, no matter how complex. The Axis
Control and Diagnostic screens are further supplemented by afully functional Autotuning utility that minimizes startup timeand allows easy optimization of motion axes. System
diagnostics are easily read from the interface. The Windows®based remote software package is included with each unit,
which allows the user to upload/download programs, modify
parameter files, and analyze motion with Aerotech’s
advanced graphical tuning package, all from the convenienceof a remote PC.

Aeronet9-Axis RackmountWith Panel-Mount Drives

CL
CP

ENET
USB
RS-232IEEE-488

MP

Ensemble Epaq

ABL1000

PRO1153-AxisFA130

3-Axis
FA90

Whether operated in stand-alone mode through the front
panel or by remote control through Ethernet or USB, the fullfunctionality of the Ensemble Epaq is available. On-board
configuration and monitoring utilities simplify remotecommunications. To allow easy serial connectivity and ease ofuse, the Epaq features an RS-232 port (additional RS-232
port is an option) and an optional IEEE-488 port.

ALAR

The Ensemble can be used to control multiple axes (from one to tenaxes) of both brush and brushless drives and motors.

Ensemble Epaq/Epaq MR Integrated Amplifier SPECIFICATIONS
Integrated Amplifier Electrical Specifications
Output Voltage

VDC

10-40 V (Bipolar)

Peak Output Current

A

10(1)

Continuous Output Current

A

5(1)

PWM Switching Frequency

kHz

N/A

Power Amplifier Bandwidth

kHz

Software Selectable

Minimum Load InductancemH

0Operating Temperature°C

0 to 50

Storage Temperature°C-20 to 85

Weightkg

0.5

Notes:
1. Actual current ratings dependent on motor resistance.

114

ML

www.aerotech.com

EPICS is used worldwide at leading light source (synchrotron)
facilities and other government laboratories. Each Ensemble
installation includes full compatibility with the EPICS open
source distributed control system, allowing Ensemble toseamlessly integrate into applications at all major research
institutions.

Controls

EPICS Drivers

NANO Technology

Advanced DSP Control
The Ensemble Epaq uses the processing power of multiple
225 MHz double precision, floating-point DSPs to offer
exceptional performance in a variety of applications,
including point-to-point motion, linear and circularinterpolation, single- and multi-axis error correction, directcommutation of linear and rotary brushless servomotors, andon-board servo autotuning. High-speed interrupts and data
logging capabilities provide a real-time link to external
systems. The Ensemble Epaq also offers high-speed position
latching capability and optional single-axis PSO (Position
Synchronized Output). Whether the requirement is simple
point-to-point motion or complex velocity profiled contours
with output on the fly, Ensemble ensures peak performance for
critical applications.

Integral Drives
The Epaq can control any combination of up to six integral
drives, while the Ensemble architecture is capable of further
expansion (with external stand-alone, single-axis drive units) to
up to nine total axes. Because the Epaq can control manydifferent types of motors, customers have excellent flexibility intheir system designs. High accuracy, linear-motor-driven airbearing stages can be controlled from the same controller
running lower precision drives with servo or stepper motors.
Parameters are easily reconfigured for these various motors
and feedback devices, so customers can adapt to changing
system needs.

Expanded Input/Output Capability
Each Epaq features an optional IEEE-488 parallel port,
second RS-232 port, and axis expansion port. On a per axis
basis the Epaq also features an optional I/O package
offering eight digital inputs and outputs, one 12-bit ±10 VDC
analog input, one 16-bit ±5 VDC output, a configurable
brake output, a second TTL encoder input for dual loop
control, and either a second marker input or PSO output. This
optional I/O package can be added to each axis so
numerous I/O can be connected to the Epaq.

Enhancing a Legacy of Success
Although Ensemble is envisioned as a general-purpose, standalone controller, it carries forward a legacy of success built
from Aerotech’s A3200 and SoloistTM controllers. It offers
enhanced capabilities that make it an ideal choice for many
aggressive motion control applications. The Ensemble motion
control architecture builds upon the Soloist’s intuitive graphicaluser interface, while offering advanced features appropriate
for multi-axis control. Ease of use is further improved with precoded LabVIEW® VIs, AeroBASICTM programming
functionality, .NET tools for C#, VB.NET, and managed C++.

www.aerotech.com

115

NANO Technology
Controls

Ensemble Epaq and Epaq MR SPECIFICATIONS
Epaq

Epaq MR

Number of Axes

Units

1 to 6

1 to 8

Encoder Inputs

1 to 6

1 Primary and 1 Auxiliary Per Axis

Power Supply

VAC

100-240 VAC; 50/60 Hz (Factory Configured)

Bus Voltage

VDC

10-80

Peak Output Current (1 sec)(1)

Apk

10

Continuous Output Current(1)Apk5Digital Inputs—

No

Digital Outputs—

No

Analog Inputs—

One 16-bit Analog Input per Axis

Analog Outputs—

No
Three Limit Inputs (CW, CCW, Home); Three Hall Effect Inputs (A, B, C); Three High-Speed
differential Inputs (sin, cos, mkr for encoder); Motor Over-Temperature Input;
One 16-bit Analog Input

Dedicated Axis I/O on Feedback Connector
Dedicated I/O on Auxiliary Feedback
Connector
I/O Expansion Board(2)sin, cos, mkr for Aux Enc; Aux Enc can be used for PSO Output
One 12-bit Differential Analog Input; One 16-bit Analog Output; Eight Digital Outputs, Optically
Isolated, Sinking or Sourcing; Eight Optically-Isolated Digital Outputs per Axis—

High Speed Data CaptureYes(2)High Speed Digital Outputs

No
No

Bi-Directional Lines
Automatic Brake Control—

Optional

Emergency Stop (ESTOP)—

Optional

Position Synchronized Output (PSO)—

Single Axis Standard
Yes (only with MXH option)

Can Output Multiplied Encoder

Yes

Can Output Square Wave Encoder
Primary Encoder Input Frequency with
Multiplication

200 kHz (MXU) or 450 kHz (MXH) sine wave

Primary Encoder Input Frequency – Square
Wave

10 MHz square wave frequency/40 MHz count rate

Secondary Encoder Input Frequency

10 MHz square wave frequency/40 MHz count rate
No

Laser Feedback Support
Encoder Multiplication(3)—x4096 (MXU); x65536 (MXH)

Resolver Interface

—

No
No

Internal Shunt Resistor

No

External Shunt
Ethernet

—

Yes

USB

Yes

RS-232Yes

FireWireNo

Fieldbus

Modbus TCP on PC
Yes

Joystick

10/100 Base T Ethernet communication interface for system setup, application networking, Epaqto-Epaq communications, embedded programming, immediate commands, and Modbus over
TCP; USB communication interface for system setup, application networking, Windows® PC
control interface; RS-232 port with programmable baud rate, length, parity,
stop bits (second RS-232 port optional)

Additional Interfaces

ESTOP to Stop All Axes

No

Keypad: 5-Key Input Pad

No

One Optional GPIB (IEEE-488)

Other I/O
Current Loop Update Rate

kHz

No
20

Servo Loop Update Rate

kHzPower Amplifier Bandwidth

kHz

Operating Temperature°C

0 to 50

Storage Temperature°C-30 to 85

Weightkg (lb)

Notes:
1. Peak value of the sine wave; rms current for AC motors is 0.707 * Apk.
2. Requires I/O option.
3. Effective multiplication factor after quadrature decoding (if applicable).

116

No

Display: Backlit 8 x 40 Character LCD

www.aerotech.com

1 to 20

1 to 20
Selectable Through Software

10 (22)16 (35)

+NANO Technology

Ensemble Epaq DIMENSIONS

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+ * + * + * + ! "$ &'

www.aerotech.com

117

4-Axis Chassis

Controls

NANO Technology

Ensemble Epaq MR DIMENSIONS

118

www.aerotech.com

NANO Technology

Ensemble Epaq MR DIMENSIONS
8-Axis Chassis

Controls

www.aerotech.com

119Aerotech at a Glance

Corporate Headquarters • Pittsburgh, PA • USA

Aerotech UK

Aerotech Germany

High Volume Manufacturing

Aerotech Japan

Worldwide Service and Support

Over 100,000
axes installedworldwide

Worldwide
startup service
and on-sitetraining

Fully equipped
on-site training
facilities

120

www.aerotech.com

Aerotech China

Technically Superior Components

High Performance Sub-AssembliesXYAB subsystem
for high dynamic
accuracy
positioning inlaser drilling andmicromachining
applications

Highestperformancebrushlesslinear androtary motors
AGR rotarystage
PRO series linear
motor stage

LaserTurn® 5 high-speed
cylindrical laser cutting system

Ndrive®

A3200

Npaq®

Award-winning Automation 3200 1-32 axis motion,
vision, PLC, robotics, and I/O platform

Best-in-Class Subsystems

Highest throughput linear motor
Cartesian gantry systems

Comprehensive TechnicalSupport Services

Custom software
application support

Highly integrated motion
subsystems with machineframe, display, andpackaged electronics

Production-proven,large format air-bearing
systems for flat panel
and semiconductor
applications

Custom-engineered
vacuum- and cleanroomcompatible systems

3D models to facilitate
faster and moreaccurate system layout

Advanced analyticaltechniques for
optimization ofsystem geometry

www.aerotech.com

121

Custom Systems
Aerotech designs and manufactures specialty high-performance subsystems. Our highly-trained staff of experienced
software and hardware engineers enables our customers to get to production readiness faster. Aerotech provides real-time
collaborative support — either at your facility, at our facility, or on the web.

122

Advanced Laser Machining

Two-Axis Part Positioner

Rapid Prototyping

Advanced Pick-PlaceInspect Station

Ion Beam Profiling in Vacuum

Precision Optical Production

High-Precision Air Bearings

Liquid-Cooled,
Vacuum-Prepped System

High Volume Production
Inspection Station

4-Axis Coordinate
Measuring MachineElectronic Inspection

High-Speed Optical Indexer

Patterned Media Inspection

Printhead Inspection Station

High-Accuracy Laser Machining

Optical Lens Fabricatingwww.aerotech.com

Awards and Recognition

Design News 2010
Golden Mousetrap Winner –ANT-130XY

Design News2008 Golden Mousetrap
Finalist Product –Nmark™ SSaM

2008 Control
Design News
Engineering Engineers’
2009 Golden Mousetrap
Choice Award –Finalist Product – LaserTurn® 1,
AGS15000, ANT95-XY
LaserTurn® 1

Semiconductor International 2007
Editors’ Choice Best Product –WaferMax T™

Product Design andDevelopment
2002 Top 50 Product –Automation 3200

Design News 2002
Best Product Nominee –Automation 3200

Lightwave NFOEC 2002
Attendees’ Choice Award –FiberMax®

Lightwave OFC 2001
Attendees’ Choice Award –FiberAlign® 130

Semiconductor
International 2008 Editors’
Choice Best Product –Ensemble™

EuroAsia IC 2006
Industry Award –WaferMax Z™

Aandrijftechniek
2002 Award –FiberMax®

Machine Design Excellence in
Manufacturing Technology –Slides/Ways 1998 and 2000

www.aerotech.com

123Capabilities in Other Markets
Photovoltaic, Fuel Cell, andAlternative Energy
Extensive application experience and a broad array of motion
products make Aerotech the perfect partner for your photovoltaic(solar cell), fuel cell, and other alternative energy manufacturing
and testing platforms. Our worldwide operation has engineered
and manufactured a multitude of motion platforms for these markets
and we continue to provide innovative solutions.

General Automation
Since 1970 Aerotech has been a manufacturer of top-quality
automation products. The breadth of the company’s product line,
including automated nanopositioners, planar air-bearing systems,
high-speed gantries, linear and rotary and lift stages, brushless linear
and rotary servomotors and drives, single- and multi-axis motion
controllers, goniometers, and gimbals/optical mounts, makes
Aerotech unique among motion control manufacturers. Aerotech is
Dedicated to the Science of Motion.

Control Systems
Aerotech motion controllers, motors, and drives are utilized in our own
positioning systems and by end users and OEMs worldwide. From ourAutomation 3200 software-based motion controller that can control up to 32
axes, to the Soloist™ single-axis servo controller, to the Ensemble™ multi-axis
stand-alone motion controller, Aerotech provides a variety of options to suit
your application.

Laser Processing
Aerotech has extensive experience in providing motion components andsubsystems for laser processes such as cutting, welding, marking, etching,and micromachining. These processes are the key to advancing technology
in markets such as photovoltaic manufacturing, aerospace and medical
device manufacturing.

124

www.aerotech.com

Medical Device Manufacturing and Life Sciences
Aerotech manufactures high-performance motion systems and components for medical
and life sciences applications including stent cutting, medical laser welding systems for
cardiac pacemakers and catheters, IOL and contact lens manufacturing, DNA
sequencing, blood sequencing, haptic mills and drills, x-ray machines, magnetic
resonance scanners, and CAT scanners. We can customize a medical laser welding
system for any need.

Government and Educational Research and Development
The breadth of Aerotech’s product line offers solutions for the wide-ranging requirements of academic
and government R&D. The fiberoptic line of positioning stages provides the accuracy required not only
for photonics experiments, but also for micro- and nano-machining workstations. Aerotech’s multi-axis
rotary positioners and gimbals offer the high precision needed for defense, satellite, and space science
research. Unique applications call for unique solutions, and Aerotech can provide custom-engineered
systems to meet your needs.

Electronics Manufacturing and Assembly
Speed, accuracy, and reliability are the key requirements for pick-and-place machines, stencil
cutting machines, printed circuit board assembly, and other electronic manufacturing andassembly equipment. Since 1970 Aerotech has exceeded the most stringent criteria used tojudge electronic manufacturing and assembly equipment, and we continue to raise thestandard with our advanced motion technologies by addressing industry-specific challenges inpick-and-place machines, stencil cutting machines, and printed circuit board assembly systems.

Test and Inspection
Aerotech is involved in test and inspection across a wide array of
industries with applications including CMMs, ultrasonic, eddy current,
x-ray, optical, and electronic. All of these applications rely on Aerotech
products’ unmatched precision, accuracy, and durability. Opticalinspection solutions range from high-end linear-motor-driven models
packaged with all control elements in an optimized machine base, tomodular systems specifically designed for cost-sensitive applications.

www.aerotech.com

125

Aerotech Online
Aerotech’s website at www.aerotech.com isyour comprehensive resource for all Aerotech
information worldwide. Complete information isprovided for all products including specifications
and downloadable 2D and 3D models. Registerfor our e-newsletter In Motion to receive news on
all of the current activities at Aerotech.

Product Navigation
Easy-to-use productnavigation intuitively
and quickly guides you
through our broad
product range.

Select your Market
Our Select a Market
feature details marketspecific automation
solutions.

126

Current Product andCompany News

Worldwide Sales
Office Locator

The most current product andcompany news is featured
prominently on our homepage.

Use our worldwide sales officelocator to quickly find an Aerotech
office near you.

www.aerotech.com

Customer Service
Our customer service center
provides contact information for
Aerotech Customer Service
worldwide. Also included aredetails on our training programs,
software and product manual
downloads, and an FAQ section.

Worldwide Training and Support
Aerotech offers comprehensive worldwide training andcustomer service either at customer facilities or at one of our
Aerotech training centers.

Our Training Program Features:• Standard and customized courses• Hands-on training with Aerotech positioning systems• Interactive training with experienced instructors• Comfortable, spacious facilities

Installation and Start up (Commissioning)
Aerotech Inc (U.S.A.)

Aerotech offers startup and commissioning services to minimize
startup times, reduce cost and accelerate time-to-production.
By combining our product knowledge with your process andapplication expertise, new systems and applications can becompleted faster at a reduced overall cost.

Engineering Support
Aerotech provides complete engineering support for our
products, including onsite support and maintenance, andremote support via phone, fax, website, and/or WebEx®
software. As a manufacturer staffed by engineers, weunderstand the unacceptability of downtime.

Training
Aerotech Ltd (United Kingdom)

Aerotech training classes are designed to help our customers
realize the full potential of our products. By demonstrating allof a product’s features and how to use them, customers havebeen able to reduce startup time and quickly optimize theirapplications. Aerotech’s classes have been developed, andcontinually upgraded, using feedback from our customers.
Since 1970, Aerotech has designed motion control andpositioning systems and components with an unsurpassed trackrecord of reliability. When you make the choice to purchasefrom Aerotech, we urge you to learn how to get the most fromyour new Aerotech products. Aerotech provides both on-site(your facility) and/or in-house (our facility) training for ourcustomers’ convenience.

Aerotech GmbH (Germany)

Aerotech KK (Japan)

www.aerotech.com

127

Dedicated to the Science of Motion

Aerotech’s Worldwide Sales and Service Locations★ - Aerotech Headquarters● - Direct Field Sales Officew w w. a e r o t e c h . c o m
CA0111A▲ - Aerotech Subsidiary ■ - Representative