NANO Technology

ANT130-V Seriesnano Motion Technology

Single-Axis Lift Direct-Drive
Nanopositioning Stage

ANT130-V Series

Nanometer performance with5 mm vertical travel
High resolution (2 nm), repeatability (100 nm),and accuracy (200 nm)
In-position stability of <2 nm
Anti-creep crossed-roller bearings
High dynamic performance

Introduction

System Characteristics

Aerotech’s ANT series stages are the world’s first nanometerlevel positioning systems with multi-millimeter travel. The
ANT130-V and ANT130-V-PLUS are linear-motor-driven
wedge-style vertical lift stages. The stages are designed to beseamlessly integrated with other stages in the ANT130 family
for superior multi-axis performance, and are offered in two
accuracy grades.

Outstanding accuracy, position repeatability, and in-position
stability require high system resolution. The ANT130-V stage’s
industry-leading 2 nm minimum incremental step size provides
this high level of performance. Excellent in-position stability isassisted by high-quality, anti-creep, crossed-roller bearings.
The stage offers virtually maintenance-free operation over thelife of the product. Aerotech’s direct-drive technology has nohysteresis or backlash, enabling accurate and repeatable
nanometer-scale motion.

All of the original ANT series’ direct-drive advantages havebeen preserved in the ANT130-V family. Only noncontact
direct-drive technology offers the robust, accurate, and highspeed positioning necessary for mass production of precision
devices. ANT130-V stages utilize advanced direct-drive
technology pioneered by Aerotech to achieve the highest
level of positioning performance. This direct-drive technology
is high-performance, non-cogging, noncontact, high-speed,high-resolution, and high-accuracy. This unique drive andbearing combination, packaged in an extremely small-profileand footprint, offers tangible advantages in many applications
such as high-precision positioning, disk-drive fabrication, fiberalignment, optical delay element actuation, sensor testing, andscanning processes that demand smooth and precise motion.

Flexible System Design
The ANT130-V family has universal mounting and tabletop
patterns that allow for easy system integration. Two, three, ormore axes can be combined easily for flexible system designs
and multi-axis configurations.

22201816Position (nm)Noncontact Direct-Drive Design

14121086420205101520Time (s)2530

ANT130-5-V-PLUS 2 nm step plot. Best-in-class resolution andexceptional in-position stability for large travel stages.

www.aerotech.com

1NANO Technology

ANT130-V/ANT130-V-PLUS Series SPECIFICATIONS
Mechanical Specifications

ANT130-5-VTravel

5 mm

Accuracy(1)±2 µm (± 80 µin)

Resolution±200 nm (± 8 µin)
2 nm (± 0.08 µin)

Repeatability (Bi-Directional)(1)

ANT130-V Series

ANT130-5-V-PLUS±150 nm (± 6 µin)±100 nm (± 4 µin)

Repeatability (Uni-Directional)±75 nm (± 3 µin)

Straightness(2)±1.0 µm (±40 µin)

Pitch(1)20 arc sec

Roll

10 arc sec

Yaw(1)

10 arc sec

Maximum Speed

75 mm/s (3 in/s)

Maximum Acceleration

0.7 g - 7 m/s2 (No Load)

Settling TimeSee graphs for typical performance

In-Position Stability(3)<2 nm (<0.08 µin)

Maximum Force (Continuous)

100 N

Load Capacity(4)3.0 kg (6.6 lb)

Moving Mass

1.8 kg (4 lb)

Stage Mass

3.1 kg (7 lb)

Material

Aluminum Body/Black Hardcoat Finish/Black Anodize Finish

MTBF (Mean Time Between Failure)

30,000 Hours

Notes:
1. Certified with each stage.
2. Measured perpendicular or parallel to wedge direction.
3. In-Position Stability listing is 3 sigma value.
4. Assumes loading along axis of travel.
• Specifications are per axis, measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard
applications.
• -PLUS requires the use of an Aerotech controller

Electrical Specifications

ANT130-5-V

Drive System

Brushless Linear Servomotor

Feedback

Noncontact Linear Encoder±40 VDC

Maximum Bus Voltage
Limit Switches

5 V, Normally ClosedHome Switch

Near Center

Recommended Controller
A3200

Npaq-MXR
Npaq MR-MXH
Ndrive ML-MXH

Ensemble

Epaq-MXH
Epaq MR-MXH
Ensemble ML-MXH

Soloist

Soloist ML-MXH

Multi-Axis

Single Axis

ANT130-5-V

Notes:
1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within
0.25ºC/24 hours. If this is not possible, alternate products are available. Please consult Aerotech Application Engineering for more information.

2www.aerotech.com

1000

1000

Straightness Error (nm)

1500
1250

750
500
2500250
500
750
1000

0250500
750
1250

1500
3210
1Position (mm)

21500

3

ANT130-5-V-PLUS straightness error, five runs, bi-directional,
parallel to the wedge.

3210
1Position (mm)23

ANT130-5-V-PLUS straightness error, five runs, bi-directional,
perpendicular to the wedge.

500

100

40080

300

← 129 ms Move and Settle

60
Position Error (nm)Position Error (nm)

500
250

1000

1250

200
100
0100200
300

402002040604008050032101Position (mm)2100

3ANT130-5-V-PLUS accuracy and repeatability. This multiple test
run over an extended period of time shows the high level of systemaccuracy and repeatability.

0101088664420240
1Position (mm)2ANT130-5-V-PLUS yaw, five runs, bi-directional. Highly
repeatable, minimal yaw error enhances system positioning
accuracy.

3600

481500062300
400Move Time (ms)2832002610100

ANT130-5-V-PLUS step and settle performance at 75 mm/s, witha settle spec of ±20 nm, and a step size of 5 mm. Outstanding
settling time enhances throughput of most applications.

Pitch (arc sec)

Yaw (arc sec)

750

ANT130-V Series

Straightness Error (nm)

1500
1250

NANO Technology

ANT130-V/ANT130-V-PLUS Series PERFORMANCE

1032101Position (mm)23

ANT130-5-V-PLUS pitch, five runs, bi-directional. Excellent
repeatability/accuracy contribute to improved processing.

www.aerotech.com

3NANO Technology

ANT130-5-V/ANT130-5-V-PLUS DIMENSIONS

126.6
16CABLE EXIT
APPROX. 0.5M TO 0.7M LONG

ANT130-V Series42.3

108

25 TYP
9X M6X1.025 TYP
94

9.070.5
1/2 MECHANICALTRAVEL
70.2
1/2 ELECTRICALTRAVEL70
1/2 NOMINALTRAVEL

WEDGE DIRECTION
6062.5

67.5
CENTER OF
TRAVEL25452 TYP

5090
126.64www.aerotech.com

MOUNTING HOLES
50 MM X 125 MM PATTERN
6.6 THRU ALL
MOUNTING HOLES
90 MM X 120 MM PATTERN
6.6 THRU ALL

120125
156.6

26.3
26.2

NANO Technology

ANT130-5-V/ANT130-5-V-PLUS Mounting Plate DIMENSIONS
7C'BORE

101.6
STAGE MOUNTING
M6 x 1.0 THRU

100

101.6

50

BREADBOARD MOUNTINGM6 OR 1/4-20 BOLTC'BORE SLOTANT130-V Series

120155155

50.8 REF

9015100
130

DIMENSIONS: MILLIMETERS

ANT130-V/ANT130-V-PLUS Series ORDERING INFORMATION
ANT130-V Series Lift Stage
ANT130-V/ANT130-V-PLUS

Aerotech nanotranslation crossed-roller bearing vertical lift positioner

Linear Stage Travel
ANT130-5-V
5 mm vertical travel lift stage with proprietary direct-drive motor technology,
1 Vp-p sinusoidal output linear encoder and limits
ANT130-5-V-PLUS
5 mm vertical travel lift stage with proprietary direct-drive motor technology,
1 Vp-p sinusoidal output linear encoder and limits (High Accuracy Version)
Output Cable Connectors-25DU
Single 25-pin D connector (standard)-4DU-25DU
4-pin HPD and 25-pin D connectors
Note: -25DU single 25-pin connector option not valid for systems using bus voltages greater than 80 VOptions-MP

Breadboard mounting plate

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