N ANOPOSITIONIN GLINEAR • ROTARY • VERTICAL LIFT AND Z • GONIOMETER

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Dedicated to theScience of Motion

You don’t have to sacrifice long travel for nanometer resolution and accuracy.
ANT95-L Single-Axis
Linear Stage
Noncontact, non-cogging, frictionlessdirect-drive – zero backlash orhysteresis
High resolution (1 nm), repeatability(75 nm) and accuracy (250 nm)
In-position stability of <1 nm
ANT95-50-L-PLUS 1 nm step plot

Anti-creep crossed-roller bearings
High dynamic performance
Available in X, XY, XYZ and manyother combinations

The ANT95-L series offers
25, 50, 75 or 100 mm travel.

ANT95-XY Dual-Axis Linear Stage
Integrated, low profile, XY linear-motor stage
Noncontact, non-cogging, frictionlessdirect-drive – zero backlash or hysteresis
High resolution (1 nm), repeatability(75 nm) and accuracy (250 nm)
In-position stability of <1 nm

ANT95-XY ULTRA 2D accuracy

Anti-creep crossed-roller bearings
High dynamic performance

The ANT95-XY series offers 25 x 25 mm or 50 x 50 mm travel.

ANT130-L Single-Axis
Linear StageThe ANT130-L series offers
35, 60, 110 or 160 mm travel.

Noncontact, non-cogging, frictionlessdirect-drive – zero backlash or hysteresis
High resolution (1 nm), repeatability(75 nm) and accuracy (250 nm)
Anti-creep crossed-roller bearings
High dynamic performance
Large selection – 4 different travel options
11109

ANT130-XY Dual-Axis Linear Stage
Integrated, low profile,
XY linear-motor stage

Position (nm)

876
5
4
3
2
10
10

Noncontact, non-cogging, frictionlessdirect-drive – zero backlash or hysteresis

5101520Time (s)2530

ANT130-060-L-PLUS 1 nm step plot

High resolution (1 nm), repeatability(75 nm) and accuracy (250 nm)
Anti-creep crossed-roller bearings
High dynamic performance

ANT130-XY ULTRA 2D accuracy
The ANT130-XY series offers 60 x 60,
110 x 110 or 160 x 160 mm travel.

High resolution (0.01 arc sec)
High performancein large travels
Outstanding error
motion specifications

0.11
0.1

0.44

0.09

0.39
0.34

0.08
0.07

0.29

0.06

0.24

0.05

0.19

0.04

0.15
0.1

0.03
0.02

0.05

0.01

00

0.05

Position (arc-sec)

Position (μrad)

ANT95-R and ANT130-R
Rotary Stages

0.53
0.48

0.01
051015Time (sec)2025

ANT95-R 0.01 arc-sec step plot

0.005 arc-second in-position
stability
3 arc-second accuracy
1.5 arc-second bi-directional
repeatability
Multi-axis configurations

The ANT95-R and ANT130-R offer
both limited and unlimited travels.

ANT-20G-90 0.25 µrad or 0.05 arc sec step size

2.25

0.45
0.4

1.75

0.35

1.5

0.3

1.25

0.25

1.0

0.2

0.75

0.15

0.5

0.1

0.25

ANT-20G Goniometers
Noncontact, non-cogging,
frictionless direct-drive forzero backlash or hysteresis

0.05

0-0.25Position (arc-sec)

Position (µrad)

2.0

005

1015Time (s)2025-0.05

High speed (150°/s)
ANT-20G-90 0.05 arc-sec step plot
High resolution (0.05 arc second)
Excellent in-position stability
Large angular range – 20° of travel
Orthogonal mountingof two cradles provides
rotation about the same point
No maintenance
Compact design
The ANT-20G series offers
a 20° rotation angle.

2220

ANT95-L-Z andANT130-L-Z

18Position (nm)16Nanometer performancein a large travel format
High resolution (2 nm), repeatability(75 nm) and accuracy (300 nm)

1412108642020In-position stability of <2 nm

5101520Time (s)2530

ANT95-50-L-Z-PLUS 2 nm step plot

Anti-creep crossed-roller bearings
High dynamic performance

The ANT95-L-Z is available
with 25 or 50 mm travel.

The ANT130-L-Z is available
with 35 or 60 mm travel.

111098

ANT95-3-V andANT130-5-V

Position (nm)765432Nanometer performancein a large travel format

10105101520Time (s)2530

ANT95-3-V 1 nm step plot

In-position stability of <1 nm
3 or 5 mm travel200 nm accuracy
Anti-creep crossed-roller
bearings
High dynamic performance

The ANT95-3-V and ANT130-5-V
both offer 200 nm accuracy.

Dedicated to the Science of Motion

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