NANO Technology
ANT95-V Series

ANT95-V Seriesnano Motion Technology

Single-Axis Lift Direct-Drive
Nanopositioning Stage
Nanometer performance with3 mm vertical travel
High resolution (1 nm), repeatability (100 nm),and accuracy (200 nm)
In-position stability of <1 nm
Anti-creep crossed-roller bearings
High dynamic performance

Introduction

System Characteristics

Aerotech’s ANT series stages are the world’s first nanometerlevel positioning systems with multi-millimeter travel. The
ANT95-V and ANT95-V-PLUS are linear-motor-driven wedgestyle vertical lift stages. The stages are designed to beseamlessly integrated with other stages in the ANT95 family
for superior multi-axis performance, and are offered in two
accuracy grades.

Outstanding accuracy, position repeatability, and in-position
stability require high system resolution. The ANT95-V stage’s
industry-leading 1 nm minimum incremental step size provides
this high level of performance. Excellent in-position stability is
assisted by high-quality, anti-creep, crossed-roller bearings.
The stage offers virtually maintenance-free operation over thelife of the product. Aerotech’s direct-drive technology has nohysteresis or backlash, enabling accurate and repeatablenanometer-scale motion.

All of the original ANT series’ direct-drive advantages havebeen preserved in the ANT95-V family. Only noncontact
direct-drive technology offers the robust, accurate, and highspeed positioning necessary for mass production of precision
devices. ANT95-V stages utilize advanced direct-drive
technology pioneered by Aerotech to achieve the highest
level of positioning performance. This direct-drive technology
is high-performance, non-cogging, noncontact, high-speed,
high-resolution, and high-accuracy. This unique drive andbearing combination, packaged in an extremely small-profileand footprint, offers tangible advantages in many applications
such as high-precision positioning, disk-drive fabrication, fiberalignment, optical delay element actuation, sensor testing, andscanning processes that demand smooth and precise motion.

11109876Position (nm)Noncontact Direct-Drive

543210Flexible System Design
The ANT95-V family has universal mounting and tabletop
patterns that allow for easy system integration. Two, three, ormore axes can be combined easily for flexible system designs
and multi-axis configurations.

80

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105101520Time (s)2530

ANT95-3-V-PLUS 1 nm step plot. Best-in-class resolution andexceptional in-position stability for large travel stages.

Mechanical Specifications

ANT95-3-V

ANT95-3-V-PLUS
3 mmTravel
Accuracy(1)±2 µm (±80 µin)±200 nm (±8 µin)
1 nm (0.04 µin)

Resolution
Repeatability (Bi-Directional)(1)±150 nm (±6 µin)±100 nm (±4 µin)

Repeatability (Uni-Directional)±75 nm (±3 µin)

Straightness(2)±1.0 µm (±40 µin)
20 arc sec

Roll(1)

10 arc sec

Yaw(1)

ANT95-V Series

Pitch(1)

10 arc sec
75 mm/s (3 in/s)

Maximum Speed

0.4 g - 4 m/s2 (No Load)

Maximum Acceleration

See graphs for typical performance

Settling Time
In-Position Stability(3)NANO Technology

ANT95-V/ANT95-V-PLUS Series SPECIFICATIONS<1 nm (<0.04 µin)
71 N

Maximum Force (Continuous)
Load Capacity(4)1.5 kg (3.3 lb)

Moving Mass

1.1 kg (2.42 lb)
2.0 kg (4.4 lb)

Stage Mass

Aluminum and Stainless-Steel Body/Black Hardcoat Finish/Black Anodize Finish

Material
MTBF (Mean Time Between Failure)

30,000 Hours

Notes:
1. Certified with each stage.
2. Measured perpendicular or parallel to wedge direction.
3. In-Position Stability listing is 3 sigma value.
4. Assumes loading along axis of travel.
• Specifications are per axis, measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standard
applications.
• -PLUS requires the use of an Aerotech controller.

Electrical Specifications

ANT95-3-V

Drive System

Brushless Linear Servomotor

Feedback

Noncontact Linear Encoder±40 VDC

Maximum Bus Voltage
Limit Switches

5 V, Normally Closed

Home Switch

Near Center

Recommended Controller
A3200

Npaq-MXR
Npaq MR-MXH
Ndrive ML-MXH

Ensemble

Epaq-MXH
Epaq MR-MXH
Ensemble ML-MXH

Soloist

Soloist ML-MXH

Multi-Axis

Single Axis

ANT95-3-V

Notes:
1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within
0.25ºC/24 hours. If this is not possible, alternate products are available. Please consult Aerotech Application Engineering for more information.

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1500
1250

1500
1250

1000

1000

Straightness Error (nm)Straightness Error (nm)NANO Technology
ANT95-V Series

ANT95-V/ANT95-V-PLUS Series PERFORMANCE

750
500
250
0250
500
750

500
750
1000
1250

10.5

00.5
Position (mm)

1

1500
1.5

1.5

500

100

400

80

300

60

200
100
0100
200
300

0.5

00.5
Position (mm)11.5

← 121 ms Move and Settle

402002040
60

400

80

500
1.5

100

10.5

00.5
Position (mm)11.5

ANT95-3-V-PLUS accuracy and repeatability. This multiple test run
over an extended period of time shows the high level of systemaccuracy and repeatability.

086644Pitch (arc sec)

1082024046800.5Position (mm)11.5

ANT95-3-V-PLUS yaw, five runs, bi-directional. Highly repeatable,
minimal yaw error enhances system positioning accuracy.

www.aerotech.com

200

280.5100150
Move Time (ms)26150

ANT95-3-V-PLUS step and settle performance at 75 mm/s, witha settle spec of ±20 nm, and a step size of 3 mm. Outstanding
settling time enhances throughput of most applications.

10101.5

1ANT95-3-V-PLUS straightness error, five runs, bi-directional,
perpendicular to the wedge.

Position Error (nm)Position Error (nm)

0250

1250
1500
1.5Yaw (arc sec)

500
250

1000

ANT95-3-V-PLUS straightness error, five runs, bi-directional,
parallel to the wedge.

82750

10
1.5

10.5

00.5
Position (mm)1

ANT95-3-V-PLUS pitch, five runs, bi-directional. Excellent
repeatability/accuracy contribute to improved processing.

1.5

NANO Technology

ANT95-3-V/ANT95-3-V-PLUS DIMENSIONSCABLE EXIT
APPROX. 1 M LONG
61

ANT95-V Series

25 TYP108

9X M4X0.7

6.0

25 TYP

21/2 MECH. LIMIT TRAVEL
1.7
1/2 ELEC. LIMIT TRAVEL
1.5
1/2 NOMINAL TRAVELWEDGE DIRECTION

50
CENTER OF
TRAVEL

37.5
75

5.3 TYP

46.5

62.5
MOUNTING HOLES
4X
4.6 THRU ALL

93.6

11.8
125141.5

DIMENSIONS: MILLIMETERS

8.9

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83

75.0
50.0

ANT95-V Series

NANO Technology

ANT95-3-V/ANT95-3-V-PLUS Mounting Plate DIMENSIONS

125.0

100.0

76.2
3.00

STAGE MOUNTING
8X M4x0.7 THRU

75.0

50.8
2.00
95.0

7.0
C'BORE
DEPTH

100.0

141.8

BREADBOARD MOUNTING
4X M6 OR 1/4-20 BOLTC'BORE SLOT

10.0

DIMENSIONS: MILLIMETERS

ANT95-V/ANT95-V-PLUS Series ORDERING INFORMATION
ANT95-V Series Lift Stage
ANT95-V/ANT95-V-PLUS Aerotech nanotranslation crossed-roller bearing vertical lift positioner
Linear Stage Travel
ANT95-3-V
3 mm vertical travel lift stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits
ANT95-3-V-PLUS
3 mm vertical travel lift stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output linear encoder and limits (High Accuracy Version)
Options-MP84

Breadboard mounting plate

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