nano Motion Technology

Single-Axis Linear Direct-DriveNanopositioning Stages

ANT130-L Series

Nanometer-level performance ina large travel format

NANO Technology

ANT130-L SeriesHigh resolution (1 nm), repeatability(75 nm), and accuracy (250 nm)
In-position stability of <1 nm
Anti-creep crossed-roller bearings
High dynamic performance
Large selection – 8 models in travel andaccuracy

The ANT130-L series stages offer nanometer-level
performance in travels up to 160 mm. With its low profile andoutstanding performance characteristics, the ANT130-L is theultimate solution for high-accuracy alignment, inspection,
positioning, and measurement stations.

Noncontact Direct-Drive
The linear motor drive also offers the advantage of higher
speeds and accelerations. The compact yet powerful linear
motor drives the ANT130-L to a peak unloaded accelerationof 1 g and a maximum velocity of 350 mm/s. The result is ahigh-accuracy device with outstanding throughput thatsignificantly outperforms comparable high-accuracy screwdriven or other stages in its class.

Outstanding Resolution
For alignment applications, outstanding step-to-step resolution
is critical. The ANT130-L meets this demand with anincremental step size of 1 nm when coupled with Aerotech
drives and controls. The direct-drive linear motor allows theANT130-L to make precise, small resolution steps. This isparticularly important in alignment applications where step
accuracy is critical.

Designed for Long Life
Like all stages in the Aerotech product family, the ANT130-L
was designed for outstanding long-term performance. Both thelinear motor and linear encoder are noncontact devices,which means they not only exhibit long-life but are totally
maintenance free.

Precision Alignment
ANT130-L series stages are easily configured as XY
assemblies. Options include precision orthogonality alignment
to 5 arc seconds and vertical axis solutions.

111098Position (nm)Introduction

76543210105101520Time (s)2530

ANT130-060-L-PLUS 1 nm step plot with 100 Hz filter. Thesestages offer best-in-class resolution and exceptional in-position
stability for large travels.

www.aerotech.com

37NANO Technology
ANT130-L Series

ANT130-L/ANT130-L-PLUS Series SPECIFICATIONS
Mechanical Specifications
TravelAccuracy(1)ANT130-035-L

ANT130-035-L-PLUS

ANT130-060-L

35 mm

35 mm

60 mm

ANT130-060-L-PLUS60 mm±2 µm (±80 µin)±250 nm (±10 µin)

±2 µm (±80 µin)±250 nm (±10 µin)

Resolution

1 nm (0.04 µin)

1 nm (0.04 µin)

1 nm (0.04 µin)

1 nm (0.04 µin)

Repeatability (Bi-Directional)(1)±100 nm (±4 µin)

±75 nm (±3 µin)±100 nm (±4 µin)

±75 nm (±3 µin)

Repeatability (Uni-Directional)±25 nm (±1 µin)

±25 nm (±1 µin)

±25 nm (±1 µin)

±25 nm (±1 µin)

Straightness(1)±1.0 µm (±40 µin)±1.0 µm (±40 µin)±1.0 µm (±40 µin)±1.0 µm (±40 µin)

Flatness(1)±1.0 µm (±40 µin)±1.0 µm (±40 µin)±1.0 µm (±40 µin)±1.0 µm (±40 µin)

Pitch

10 arc sec

10 arc sec

10 arc sec

10 arc sec

Roll

10 arc sec

10 arc sec

10 arc sec

10 arc sec

Yaw

5 arc sec

5 arc sec

5 arc sec

5 arc sec

350 mm/s (14 in/s)

350 mm/s (14 in/s)

350 mm/s (14 in/s)

350 mm/s (14 in/s)

1 g - 10 m/s2 (No Load)

1 g - 10 m/s2 (No Load)

1 g - 10 m/s2 (No Load)

1 g - 10 m/s2 (No Load)

Maximum Speed
Maximum Acceleration

See graph for typical performance

Speed Stability

See graph for typical performance

Settling Time
In-Position Stability(2)Maximum Force (Continuous)
Horizontal
Load Capacity(3)Side<1 nm (<0.04 µin)

<1 nm (<0.04 µin)

<1 nm (<0.04 µin)

23 N

23 N

23 N

<1 nm (<0.04 µin)
23 N

12.0 kg (26.5 lb)

12.0 kg (26.5 lb)

12.0 kg (26.5 lb)

12.0 kg (26.5 lb)

10 kg (22 lb)

10 kg (22 lb)

10 kg (22 lb)

10 kg (22 lb)

Moving Mass

1.2 kg (2.6 lb)

1.2 kg (2.6 lb)1.4 kg (3.1 lb)

1.4 kg (3.1 lb)

Stage Mass

2.1 kg (4.6 lb)

2.1 kg (4.6 lb)

2.5 kg (5.5 lb)

2.5 kg (5.5 lb)

Aluminum Body/Black Hardcoat Finish

Material

30,000 Hours

MTBF (Mean Time Between Failure)

Notes:
1. Certified with each stage.
2. In-Position Jitter listing is 3 sigma value.
3. Axis orientation for on-axis loading is listed.
• Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of combined multi-axis systems is payload and workpoint dependent. Consult factory for
multi-axis or non-standard applications.
• -PLUS requires the use of an Aerotech controller.

Mechanical Specifications
TravelAccuracy(1)ANT130-110-L

ANT130-110-L-PLUS

ANT130-160-L

110 mm

110 mm

160 mmANT130-160-L-PLUS
160 mm±3 µm (±120 µin)±300 nm (±12 µin)

±4 µm (±160 µin)±300 nm (±12 µin)

Resolution

1 nm (0.04 µin)

1 nm (0.04 µin)

1 nm (0.04 µin)

1 nm (0.04 µin)

Repeatability (Bi-Directional)(1)±100 nm (±4 µin)

±75 nm (±3 µin)±100 nm (±4 µin)

±75 nm (±3 µin)

Repeatability (Uni-Directional)±25 nm (±1 µin)

±25 nm (±1 µin)

±25 nm (±1 µin)

±25 nm (±1 µin)

Straightness(1)±1.0 µm (±40 µin)±1.0 µm (±40 µin)±1.5 µm (±60 µin)±1.5 µm (±60 µin)

Flatness(1)±1.0 µm (±40 µin)±1.0 µm (±40 µin)±1.5 µm (±60 µin)±1.5 µm (±60 µin)

Pitch

10 arc sec

10 arc sec

10 arc sec

10 arc sec

Roll

10 arc sec

10 arc sec

10 arc sec

10 arc sec

Yaw

5 arc sec

5 arc sec

5 arc sec

5 arc sec

350 mm/s (14 in/s)

350 mm/s (14 in/s)

350 mm/s (14 in/s)

350 mm/s (14 in/s)

1 g - 10 m/s2 (No Load)

1 g - 10 m/s2 (No Load)

1 g - 10 m/s2 (No Load)

1 g - 10 m/s2 (No Load)

Maximum Speed
Maximum Acceleration

See graph for typical performance

Speed Stability

See graph for typical performance

Settling Time
In-Position Stability(2)Maximum Force (Continuous)
Horizontal
Load Capacity(3)<1 nm (<0.04 µin)

<1 nm (<0.04 µin)

<1 nm (<0.04 µin)

23 N

23 N

23 N

<1 nm (<0.04 µin)
23 N

12.0 kg (26.5 lb)

12.0 kg (26.5 lb)

12.0 kg (26.5 lb)

12.0 kg (26.5 lb)

10 kg (22 lb)

10 kg (22 lb)

10 kg (22 lb)

10 kg (22 lb)

Moving Mass

1.9 kg (4.2 lb)

1.9 kg (4.2 lb)

2.3 kg (5.1 lb)

2.3 kg (5.1 lb)

Stage Mass

3.3 kg (7.3 lb)

3.3 kg (7.3 lb)

3.9 kg (8.6 lb)

3.9 kg (8.6 lb)

Side

Material
MTBF (Mean Time Between Failure)

Aluminum Body/Black Hardcoat Finish
30,000 Hours

Notes:
1. Certified with each stage.
2. In-Position Jitter listing is 3 sigma value.
3. Axis orientation for on-axis loading is listed.
• Specifications are for single-axis systems measured 25 mm above the tabletop. Performance of combined multi-axis systems is payload and workpoint dependent. Consult factory for
multi-axis or non-standard applications.
• -PLUS requires the use of an Aerotech controller.

38

www.aerotech.com

ElectricalSpecifications

ANT130-035-L
ANT130-060-L
ANT130-110-L
ANT130-160-L
ANT130-035-L-PLUS ANT130-060-L-PLUS ANT130-110-L-PLUS ANT130-160-L-PLUS

Drive System

Brushless Linear Servomotor

Feedback

Noncontact Linear Encoder±40 VDC

Maximum Bus Voltage
Limit Switches

5 V, Normally Closed

Home Switch

Near Center

ANT130-035-L
ANT130-060-L
ANT130-110-L
ANT130-160-L
ANT130-035-L-PLUS ANT130-060-L-PLUS ANT130-110-L-PLUS ANT130-160-L-PLUS

A3200

Npaq-MXR
Npaq MR-MXH
Ndrive ML-MXH

Ensemble

Epaq-MXH
Epaq MR-MXH
Ensemble ML-MXH

Soloist

Soloist ML-MXH

Multi-Axis

Single Axis

ANT130-L Series

Recommended
Controller

NANO Technology

ANT130-L/ANT130-L-PLUS Series SPECIFICATIONS

Notes:
1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within
0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech Application Engineering for more information.

www.aerotech.com

39

100.25

100

100.2

80

100.1560
Position Error (nm)

Velocity (mm/s)

NANO Technology
ANT130-L Series

ANT130-L/ANT130-L-PLUS Series PERFORMANCE

100.1
100.05100
99.95
99.9020
40

99.8

80
100

99.75
2015

10505Position (mm)1015020Straightness Error (nm)300
Position Error (nm)400600Move Time (ms)

800

1000

15001250

400

200
1000100200300

1000
750
500
2500250500
750
1000

400

1250
2010010Position (mm)

2030

1500
30

2010010Position (mm)20ANT130-060-L-PLUS yaw, five runs, bi-directional. Highly
repeatable, minimal yaw error enhances system positioning
accuracy.

www.aerotech.com

3020

10010Position (mm)2030

ANT130-060-L-PLUS straightness error, bi-directional.
Exceptional and highly repeatable performance is assured withminimal straightness error.

Pitch (arc sec)

ANT130-060-L-PLUS accuracy and repeatability, five runs, bidirectional over an extended period of time shows the high level ofsystem accuracy and repeatability.

Yaw (arc sec)

200

ANT130-060-L-PLUS step and settle performance with 1 kg
payload. Outstanding settling time enhances throughput of mostapplications.

50076543210123456730

 216 ms Move and Settle

2060

ANT130-060-L-PLUS velocity performance at 100 mm/s and1 kg payload. Excellent speed stability is another feature ofthe ANT series stages.

404099.85

50030

Step Size: 50 mm
Speed: 350 mm/s
Settle Spec: 20 nm

765432101234567302010010Position (mm)20

ANT130-060-L-PLUS pitch, five runs, bi-directional. Excellent
repeatability/accuracy contribute to improved processing.

30

NANO Technology

ANT130-L/ANT130-L-PLUS DIMENSIONS
125
905075
SQ.

50

CLANT130-L Series

CL120

M6X1.07(19) PLACESCENTERED ON CARRIAGE

D/2

D/2

B/2

A

130

C/245C120
1.

E

90

12.72008
1. ANT130-110-L AND ANT130-160-L ONLY
6.8
DETAIL CSCALE 2 : 5MOUNTING HOLES TYP.

MODEL

A = STAGELENGTH

B = NOMINALTRAVELC = LIMITTRAVELD = HARDSTOPTRAVELE

ANT130-035-L

15535415027

ANT130-060-L

180

60667542

ANT130-110-L

230110116

12567

ANT130-160-L

280160166

17592

DIMENSIONS: MILLIMETERS

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41

B

STAGE MOUNTING
M6 x 1.0 THRU

ANT130-L Series

NANO Technology

ANT130-L/ANT130-L-PLUS Mounting Plate DIMENSIONS

120

DEF

GA

HCBREADBOARD MOUNTING
M6 OR 1/4-20 BOLTC'BORE SLOT

1590130

DIMENSIONS: MILLIMETERS42www.aerotech.com

ANT130-L Series Linear Stage
ANT130-L/ANT130-L-PLUS

Aerotech nanotranslation crossed-roller linear positioner

35 mm travel stage with linear motor and limits
35 mm travel stage with linear motor and limits (high accuracy version)
60 mm travel stage with linear motor and limits
60 mm travel stage with linear motor and limits (high accuracy version)
110 mm travel stage with linear motor and limits
110 mm travel stage with linear motor and limits (high accuracy version)
160 mm travel stage with linear motor and limits
160 mm travel stage with linear motor and limits (high accuracy version)

Output Cable Connectors-25DU
Single 25-pin D connector (standard)-4DU-25DU
4-pin HPD and 25-pin D connectors
Note: -25DU single 25-pin connector option not valid for systems using bus voltages greater than 80 VOptions-MP

ANT130-L Series

Linear Stage Travel
ANT130-035-L
ANT130-035-L-PLUS
ANT130-060-L
ANT130-060-L-PLUS
ANT130-110-L
ANT130-110-L-PLUS
ANT130-160-L
ANT130-160-L-PLUS

NANO Technology

ANT130-L/ANT130-L-PLUS Series ORDERING INFORMATION

Breadboard mounting plate

www.aerotech.com

43