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Crystal12
Sensor
IPN 074-398-P1

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IPN 074-398-P1A

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Trademarks
The trademarks of the products mentioned in this Operating Manual are held by the companies that
produce them.
INFICON®, Crystal12™, and Composer® are trademarks of INFICON Inc.
ConFlat® is a registered trademark of Varian Associates.
Teflon® is a registered trademark of Dupont.
Scotch-Brite™ is a trademark of 3M.
SWAGELOK® and CAJON® are registered trademarks of Swagelok, Co.
Inconel® is a registered trademark of International Nickel Co.
Microdot® is a registered trademark of Microdot Corp.
All other brand and product names are trademarks or registered trademarks of their respective companies.

The information contained in this Operating Manual is believed to be accurate and reliable. However, INFICON
assumes no responsibility for its use and shall not be liable for any special, incidental, or consequential
damages related to the use of this product.
All rights reserved. Reproduction or adaptation of any part of this document without permission is unlawful.

© 2004 INFICON

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If you have additional comments, please contact INFICON.®

GLOBAL HEADQUARTERS:
Two Technology Place, East Syracuse, NY 13057 USA
Tel: +1.315.434.1100 Fax: +1.315.437.3803 E-mail: reachus@inficon.com
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Importance(ranked from
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FIRST CLASS PERMIT NO. 49 EAST SYRACUSE, NEW YORKPOSTAGE WILL BE PAID BY ADDRESSEEINFICON INC.
Two Technology Place
East Syracuse, New York 13057-9714

Warranty
WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products
manufactured by it, or by an affiliated company and sold by it, and described on
the reverse hereof, to be, for the period of warranty coverage specified below, freefrom defects of materials or workmanship under normal proper use and service.
The period of warranty coverage is specified for the respective products in therespective Seller instruction manuals for those products but shall not be less thanone (1) year from the date of shipment thereof by Seller. Seller's liability under thiswarranty is limited to such of the above products or parts thereof as are returned,
transportation prepaid, to Seller's plant, not later than thirty (30) days after the
expiration of the period of warranty coverage in respect thereof and are found bySeller's examination to have failed to function properly because of defective
workmanship or materials and not because of improper installation or misuse andis limited to, at Seller's election, either (a) repairing and returning the product orpart thereof, or (b) furnishing a replacement product or part thereof, transportation
prepaid by Seller in either case. In the event Buyer discovers or learns that a
product does not conform to warranty, Buyer shall immediately notify Seller inwriting of such non-conformity, specifying in reasonable detail the nature of suchnon-conformity. If Seller is not provided with such written notification, Seller shallnot be liable for any further damages which could have been avoided if Seller had
been provided with immediate written notification.
THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHERWARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR
OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S
EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLDHEREUNDER. All other obligations and liabilities of Seller, whether in contract or
tort (including negligence) or otherwise, are expressly EXCLUDED. In no event
shall Seller be liable for any costs, expenses or damages, whether direct orindirect, special, incidental, consequential, or other, on any claim of any defective
product, in excess of the price paid by Buyer for the product plus returntransportation charges prepaid.
No warranty is made by Seller of any Seller product which has been installed,
used or operated contrary to Seller's written instruction manual or which has been
subjected to misuse, negligence or accident or has been repaired or altered byanyone other than Seller or which has been used in a manner or for a purpose forwhich the Seller product was not designed nor against any defects due to plans or
instructions supplied to Seller by or for Buyer.
This manual is intended for private use by INFICON® Inc. and its customers.
Contact INFICON before reproducing its contents.
NOTE: These instructions do not provide for every contingency that may arise inconnection with the installation, operation or maintenance of this equipment.
Should you require further assistance, please contact INFICON.

GLOBAL HEADQUARTERS:
Two Technology Place, East Syracuse, NY 13057 USA
Tel: +1.315.434.1100 Fax: +1.315.437.3803 E-mail: reachus@inficon.com
Visit us on the web a t: w w w.in fic o n .c o m©2004 INFICON

Contact List
For Customer Support, contact the INFICON office nearest to you.
Customer Support information is also available at www.inficon.com.
North America
USA — East Syracuse, NY
Phone: +1.315.434.1100
Fax: +1.315.437.3803
Email: service.usa@inficon.com
USA — Santa Clara, CA
Phone: +1.408.361.1200
Fax: +1.408.362.1556
Email: service.usa@inficon.com
USA — Austin, TX
Phone: +1.512.448.0488
Fax: +1.512.448.0398
Email: service.usa@inficon.com

EuropeGermany — Koeln
Phone: +49.221.347.42222
Fax: +49.221.347.42221
Email: leakdetection.service@inficon.com
Principality of Liechtenstein — Balzers
Phone: +423.388.3111
Fax: +423.388.3700
Email: service.europe@inficon.com

Asia / Pacific
China — Beijing
Phone: +86.10.6590.0164
Fax: +86.10.6590.0521
Email: reach.china@inficon.com
China — Guangzhou
Phone: +86.20.8723.6963
Fax: +86.20.8723.6003
Email: reach.china@inficon.com
China — Hong Kong
Phone: +852.2520.2880
Fax: +852.2865.6883
Email: reach.china@inficon.com
China — Shanghai
Phone: +86.21.6209.3094
Fax: +86.21.6295.2852
Email: reach.china@inficon.com

Singapore
Phone: +65.890.6250
Fax: +65.890.6266
Email: reach.singapore@inficon.com
Taiwan — HsinChu
Phone: +886.3.552.5828
Fax: +886.3.552.5829
Email: reach.taiwan@inficon.com

Middle East / Africa
IsraelPhone: +972.3.534.6822
Fax: +972.3.534.2589
South Africa
Phone: +27.11.793.6831
Fax: +27.11.793.7172
TurkeyPhone: +90.216.327.4041
Fax: +90.216.327.4046

Latin America
Argentina
Phone: +54.11.4701.6200
Fax: +54.11.4702.2546
Bolivia
Phone: +59.12.32.2198
Fax: +59.12.32.9751
BrazilPhone: +55.11.41544888
Fax: +55.11.41544888
Email: pv@prestvacuo.com.br
Chile
Phone: +56.2.235.9686
Fax: +56.2.235.1680
Columbia
Phone: +57.1.335.1100
Fax: +57.1.269.6923
Email: reciend@colomsat.net.co
EcuadorPhone: +59.32.22.7174
Fax: +59.32.50.2996

Japan — Yokohama
Phone: +81.45.471.3328
Fax: +81.45.471.3327
Email: reach.japan@inficon.com

MexicoPhone: +52.5.752.6746
Fax: +52.5.754.8664
Email: meisaventas@infosel.net.mx

Korea — Suwon
Phone: +82.31.708.2891
Fax: +82.31.708.3056
Email: reach.korea@inficon.com

Peru
Phone: +51.14.51.8947
Fax: +51.14.64.1820
Venezuela
Phone: +58.2.944.2010
Fax: +58.2.944.3123

Crystal12 Sensor Operating Manual

Table Of Contents
Chapter 1
Sensor Specifications
1.1
1.1.1
1.1.1.1

Specifications for Crystal12 Sensor 750-667-G1 . . . . . . . . . . . . . . . . . . . . . 1-1
Installation Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
Feedthrough . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2

1.1.1.2

Other. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2

1.1.1.3

Utilities . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2

1.1.2
1.1.3
1.1.4
1.1.4.1

Materials . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
Unpacking Instructions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
Inventory. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
Standard . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

1.1.4.2

Options . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4

1.2
1.2.1
1.3
1.3.1

Using this Manual . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12
Symbols and their Definitions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-12
How to Contact Customer Support. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-13
Returning Your Crystal12 Sensor to INFICON . . . . . . . . . . . . . . . . . . . . . . 1-13

Chapter 2

IPN 074-398-P1A

Sensor Installation
2.1
2.1.1
2.1.2
2.2
2.2.1
2.3
2.3.1
2.4
2.4.1
2.4.2
2.5
2.5.1
2.5.2
2.6

Crystals in the Crystal12 Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
Handle the Crystal with Care . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
Replacing Crystals . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
Pre-installation Sensor Check . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2
Cygnus Deposition Controller. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
General Guidelines for Crystal12 Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
Crystal Sensor Installation . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-5
Crystal12 Sensor Installation when used with Cygnus. . . . . . . . . . . . . . . . . 2-7
Changing Crystal Sensor Type andProgramming the Relay Outputs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-7
Wiring the Relay Outputs with Relay I/O Boards
760-162-G1 or 760-162-G1/G2 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-9
Crystal12 Operation when used with a Cygnus . . . . . . . . . . . . . . . . . . . . . 2-11
Initialization. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11
Crystal Switching . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-11
Crystal12 Sensor Requirement when Not Installed with a Cygnus . . . . . . 2-12

TOC - 1Crystal12 Sensor Operating Manual

Chapter 3
Installation of the Solenoid Valve Assembly
3.1
3.2
3.3
3.3.1
3.3.2

Installation with 1” Bolts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
Installation with 2 3/4” Feedthrough . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
Electrical and Pneumatic Connections. . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Electrical. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Pneumatic Solenoid Tube Connections . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3

Chapter 4
4.1
4.1.1
4.1.2
4.1.3
4.2
4.3
4.3.1
4.3.2
4.3.3
4.3.3.1

General Precautions. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
Maintain the Temperature of the Crystal . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
Use the Optimum Crystal Type . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
Crystal Concerns when Opening the Chamber . . . . . . . . . . . . . . . . . . . . . . 4-1
Crystal Seat Maintenance . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
Alignment Instruction for Crystal12 Sensor (IPN 750-667) . . . . . . . . . . . . . 4-2
Required Equipment. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2
Procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-3
Replacing the Bellows Assembly (750-286-P2) . . . . . . . . . . . . . . . . . . . . . . 4-6
Equipment required: . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6

4.3.3.2

Procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6

4.3.4
4.3.4.1

Replacing the Electrical Connection Assembly . . . . . . . . . . . . . . . . . . . . . . 4-7
Equipment Required. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7

4.3.4.2

Procedure. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-7

4.4
4.5

Cygnus Status and Error Messages. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8
Troubleshooting the Crystal12 Sensor . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-8

Chapter 5
Feedthrough Outline Drawings

TOC - 2

IPN 074-398-P1A

MaintenanceCrystal12 Sensor Operating Manual

Chapter 1
Sensor Specifications
1.1 Specifications for Crystal12 Sensor 750-667-G1
The Crystal12 sensor is a twelve crystal quartz crystal deposition monitor
transducer. When the monitor crystal being used fails, a new crystal is advanced
into position, fully replacing the failed crystal’s function. The mechanism used forproviding this motion is pneumatically powered. The logic for automatic operationof this transducer is provided with the Cygnus™ Deposition Controller.
See Figure 1-1 and Table 1-1.
Figure 1-1 Crystal12 Sensor

Table 1-1 Sensor Specification

074-398-P1A

Maximum bakeout temp with no water

130 °C

300 °C
Maximum operating isothermal
environment temperature with minimum
water flow
Size (maximum envelope)4.0" (102 mm) dia. x 3.3" (84 mm) high4.75" (121 mm) dia. x 3.46" (88 mm) with
optional mounting posts installed

Water, air and coax length

Standard 30" (762 mm)

Crystal exchange

Front-loading

Mounting

Six #4-40 tapped holes on the back of thesensor body, six #4-40 tapped holes on
outside circumference. Three #6-32
tapped holes with optional mounting kit.

1-1

Crystal12 Sensor Operating Manual

1.1.1 Installation Requirements
1.1.1.1 Feedthrough

Qty (1) 2-3/4" ConFlat® with two coaxial feedthroughs, two pass water, one air
IPN 002-080, See Figure 5-2 on page 5-2 or,Qty (1) 1" bolt with 1 coaxial feedthrough, two pass water, one air IPN
750-030-G1, see Figure 5-1 on page 5-1.

User to provide mounting structure adequate to support weight of Crystal12
and designed to facilitate removal and replacement with minimal change inexact position. An optional mounting post kit, IPN 750-670-G1, may bepurchased for this purpose.

1.1.1.2 Other

CAUTION
Do not mount the Crystal12 unsupported.
User to provide vacuum-tight braze joints or connectors for the water and airtubes.



Valve assembly for air, IPN 750-420-G1 (not provided), with a 0.022" restrictor
orifice installed by the user. (Orifice included with Crystal12 accessory kit.) See
Table 1-3 on page 1-4.



XIU or Oscillator designed to interface with the Cygnus controller.



Minimum water flow 150-200 cc/min, 30 °C max (Do not allow water to freeze).
Coolant should not contain chlorides as stress corrosion cracking may occur.

Regulated air supply 80-90 PSIG (5.5 bar - 6.2 bar) [550 kPa - 620 kPa]

2 meter maximum length of 1/8" tubing between bellows assembly and thecontrol valve.

CAUTION
Do not allow water tubes to freeze. This may happen if thetubes pass through a cryogenic shroud and the fluid’s
flow is interrupted.

1-2

074-398-P1A

1.1.1.3 Utilities

Crystal12 Sensor Operating Manual

1.1.2 Materials
Table 1-2 Materials

Plate, Material Shield, Mechanical Parts, 304 type stainless steel
Body and Carousel
Springs, Electrical Contacts

Au plated Be-Cu, Au Plate 302 stainlesssteel

Water and air tubes

S-304, 0.125" (3.2 mm) O.D. x .016"(0.4 mm) Wall Thickness x 30" Long (762mm) Seamless Stainless Steel Tubing

Connector

Stainless steel

Insulators

Teflon®, Peek®

Cable

Teflon insulated copper plated steel

Crystal0.550" (13.97 mm) Diameter

1.1.3 Unpacking Instructions
The Crystal12 sensor and accessories are packaged in a single cardboard cartonwith rigid foam inserts.
Carefully remove the packaged accessories before removing the sensor.
The unit in the shipped condition has been aligned at the factory, no furtheralignment is required.

074-398-P1A

During shipment, units may vibrate slightly out of position. This does not meanalignment is required. The unit will return to the centered position the first time it ispneumatically activated.

1-3

Crystal12 Sensor Operating Manual

1.1.4 Inventory
1.1.4.1 Standard
In addition to the basic transducer, the complete shipping package includes anaccessory kit (IPN 750-268-G3) which consists of the following:
Table 1-3 Contents of Accessory Kit

Qty IPN

Description

X 750-268-G3

Accessory Kit, Crystal12 Sensor

1 750-254-G2

Assembly, Alignment Tool

1 074-5000

CD, Thin Film Manuals

2 008-010-G10 Sensor Crystal 6 MHz (10 crystals per package)
1 059-189

CC-1010-0225 Orifice 0.0225" diameter2 070-201#4 Split Lock Washer, Stainless Steel2 084-032#4-40x0.375" Long Socket Head Cap Screw, Stainless Steel2 084-039#4-40x0.500" Long Socket Head Cap Screw, Stainless Steel2 084-084#4-40x0.688" Long Socket Head Cap Screw, Stainless Steel

1 070-828

Hex Wrench 1/16" SC9-3

1 070-829

Hex Wrench 3/32" SC9-5

1 070-1175

Hex Wrench 5/64" SC9-4

1 750-037-G1

Spring Tube Bender Kit

1 750-191-G1

Molybdenum Disulfide in Alcohol

Table 1-4 Options

1-4

Qty IPN

Description

1 750-670-G1

Mounting Post Kit

1 750-420-G1

3-Way Solenoid Valve Assembly

074-398-P1A

1.1.4.2 Options

074-398-P1A

Figure 1-2 Outline of Crystal12 Sensor - Page 1 of 2

Crystal12 Sensor Operating Manual1-5

074-398-P1A

Figure 1-3 Outline of Crystal12 Sensor - Page 2 of 2

Crystal12 Sensor Operating Manual1-6

074-398-P1A

Figure 1-4 Assembly Crystal12 Sensor - Page 1 of 4

Crystal12 Sensor Operating Manual1-7

074-398-P1A

Figure 1-5 Assembly Crystal12 Sensor - Page 2 of 4

Crystal12 Sensor Operating Manual1-8

074-398-P1A

Figure 1-6 Assembly Crystal12 Sensor - Page 3 of 4

Crystal12 Sensor Operating Manual1-9

074-398-P1A

Figure 1-7 Assembly Crystal12 Sensor - Page 4 of 4

Crystal12 Sensor Operating Manual

1 - 10Crystal12 Sensor Operating Manual
Figure 1-8 Crystal Carousel

4
Locating Hole3

Alignment Hole2
6 MHz Crystals

1

074-398-P1APin

1 - 11Crystal12 Sensor Operating Manual

1.2 Using this Manual
Please take a moment to read the following.

1.2.1 Symbols and their Definitions
NOTE: Notes provide additional information about the current topic.
HINT: Hints provide insight into product usage.

CAUTION
This caution paragraph cautions against actions which
may bring about a malfunction or the loss of data.

WARNING
This warning paragraph warns of actions that may resultin physical injury to the user.

WARNING - Risk Of Electric Shock074-398-P1A

This warning paragraph warns of potentially lethal
voltages.

1 - 12

Crystal12 Sensor Operating Manual

1.3 How to Contact Customer Support
If you need assistance with your sensor, please read this Operating Manual before
contacting Customer Support. If you can not find the answer in this manual, decide
whether:Your sensor functions, but it does not work for your application — request
Application Assistance.

Your sensor functions, but you need to know how to use it — request TechnicalSupport.

Your sensor does not function (it’s broken) — request Repair Services.



You need to order parts — request Order Services.

When you contact Customer Support, please have the following information readily
available:

The Lot Identification Code for your sensor. For the location of the Lot
Identification Code, refer to Figure 1-4 on page 1-7.



A description of your problem.

An explanation of any corrective action that you may have already attempted.

The exact wording of any error messages that you have received.

To contact Customer Support. refer to the contact list located at the front of thismanual. Or, contact your sales office. Or, see the www.inficon.com website.

1.3.1 Returning Your Crystal12 Sensor to INFICON

074-398-P1A

Do not return any component of your sensor to INFICON without first speaking witha Customer Support Representative. You must obtain a Return Material
Authorization (RMA) number from the Customer Support Representative.
If you deliver a package to INFICON without an RMA number, your package will beheld and you will be contacted. This will result in delays in servicing your sensor.
Prior to being given an RMA number, you will be required to complete a Declaration
Of Contamination (DOC) form if your sensor has been exposed to processmaterials. DOC forms must be approved by INFICON before an RMA number isissued. INFICON may require that the sensor be sent to a designateddecontamination facility, not to the factory. Failure to follow these procedures will
delay the repair of your sensor.

1 - 13

Crystal12 Sensor Operating Manual

074-398-P1A

This page is intentionally blank.

1 - 14

Crystal12 Sensor Operating Manual

Chapter 2
Sensor Installation
Successful operation of any crystal sensor depends on proper placement,
compatibility of its construction with its operating environment and connection toproper utilities.
NOTE: The sensor head, water tubes, cable, etc. should be clean and grease freewhen installed in the vacuum chamber. These parts should be handled
while wearing clean nylon gloves. If parts do become contaminated, clean
them thoroughly using a suitable solvent to avoid outgassing andexcessive peeling of deposition material from the sensor’s surfaces.

2.1 Crystals in the Crystal12 Sensor
2.1.1 Handle the Crystal with Care
Always use clean nylon lab gloves and clean nylon or Teflon tweezers whenhandling the crystal. Handle the crystals only by their edges. Anything that comesin contact with the crystal surfaces may leave contamination, which may lead topoor film adhesion. Poor film adhesion will result in high rate noise and premature
crystal failure.

CAUTION074-398-P1A

Do not use metal tweezers to handle crystals. Metal
tweezers may chip the edge of the crystal and lead toshort life, erratic resonance, or both.

2.1.2 Replacing Crystals
Replacing crystals in the Crystal12 requires removal of the front deposition shield(item 17, Figure 1-5 on page 1-8). This is accomplished by removing the two
captive fasteners that attach the front deposition shield to the carousel housing(item 14, Figure 1-5 on page 1-8).
The crystal carousel (item 15, Figure 1-5 on page 1-8) is removed from thecarousel housing by gripping the carousel assembly by the protruding hub andapplying pressure using your index finger near the radial edge of the carousel.
The Cygnus detects when a carousel is removed and displays a "Carousel
Change-Out" message. When a carousel change-out occurs, all crystals are
identified as failed with a message displayed on the channel pages. Crystal

2-1

Crystal12 Sensor Operating Manual

position 12 is displayed as the assumed current position until the change-out iscomplete and a rotate head or crystal switch function is performed. At the end of
the rotate head function, the sensor will be at position number 1.
Replacement of the twelve monitor crystals requires the removal of the two
fasteners (item 4, Figure 1-8 on page 1-11) that secure the two halves (items 1 and
3) of the assembly.
Exchanging the crystals is accomplished by inverting the plate (item 1, Figure 1-8
on page 1-11) containing the used crystals and installing the new crystals (item 2)in the orientation shown in Figure 1-8 on page 1-11.
Reassemble the crystal carousel assembly by orientating the pin protruding fromitem 1 (refer to Figure 1-8 on page 1-11) with the hole provided in item 3, thensecuring the two halves with fasteners (item 4).
To install the carousel assembly into the Crystal12 sensor, grasp the carousel
assembly by the protruding hub and orient the locating hole of the carousel
assembly (item 15, Figure 1-5 on page 1-8) with the #6-32 location screw (item 21,
Figure 1-5 on page 1-8). The carousel assembly should snap into place.
Orient and attach the front deposition shield (item 17, Figure 1-5 on page 1-8) tothe carousel housing (item 14, Figure 1-5 on page 1-8) using the two knurledcaptive fasteners.

A "Rotate Head" function is initiated via remote communications, or from thefront display soft key of either the ALL CHANNELS MAINTENANCE display or
the individual CHANNEL SENSOR MAINTENANCE display. This is thepreferred method because it ensures the correct position is detected whileproviding an accurate accounting of good and failed crystals.



A crystal switch function via the front display "soft key", hand held controller or
remote communication is initiated.

The user manually rotates the carousel to make electrical contact.

When the Cygnus detects a crystal position, the "Carousel Change-Out" message
is removed and all crystals are labeled as good.

2.2 Pre-installation Sensor Check
Prior to installing the sensor in the vacuum system, you should make certain it is inproper working condition by following the procedure outlined below.

2-2

074-398-P1A

The crystal status and "Carousel Change-Out" message on the Cygnus display willremain unchanged subsequent to a carousel replacement until one of the following
occurs.

Crystal12 Sensor Operating Manual

2.2.1 Cygnus Deposition Controller
1 Connect the in-vacuum sensor head cable to the feedthrough or a coax adapter(Microdot/BNC).

2 Connect one end of the 6" XIU cable (IPN 755-257-G6) to the BNC connectorof the feedthrough.

3 Connect the other end of the 6" XIU cable to the connector of the XIU (IPN
760-600-G1).

4 Connect one end of the XIU cable (IPN 600-1039-Gxx) to the mating connectorof the XIU.

5 Connect the other end of the XIU cable to a sensor channel at the rear of thecontroller.

6 Connect power to the controller and set the power switch to ON. The instrument
will power up in the ALL CHANNELS display.


If the RATE field corresponding to the sensor channel selected in theprevious step is displayed in normal video and is actively being updated,
you can assume the sensor is in proper working order and may be installed.



If the RATE field is displayed in inverse video, a failed crystal condition
exists for the specific channel. The carousel assembly (item 15, Figure 1-5
on page 1-8) may have to be manually advanced by hand to make anelectrical contact to correct the failed condition.
NOTE: The carousel assembly may also be advanced by temporarily
connecting a regulated air supply (80-90 PSIG (5.5 bar - 6.2 bar)[550 kPa - 620 kPa]) to the tube of the bellows assembly (item 37,
Figure 1-5 on page 1-8).

074-398-P1A

2.3 General Guidelines for Crystal12 Sensor
Figure 2-1 shows the typical installation of an INFICON water-cooled crystal sensor
in the vacuum process chamber. Refer to Chapter 3 for information regarding the
installation of the solenoid valve assembly (750-420-G1) used to pneumaticallyindex the sensor. Use the illustration and the following guidelines to install yoursensor(s) for optimum performance and convenience.

2-3

Crystal12 Sensor Operating Manual
Figure 2-1 Typical Cystal12 Installation for Cygnus

Crystal12
IPN 750-667-G1

AIR 80-90 PSIGCHANNEL 1 or 2 (STANDARD)CYGNUS2-4

074-398-P1A

IPN 750-420-G1

Crystal12 Sensor Operating Manual

2.3.1 Crystal Sensor Installation
Generally, install the sensor as far as possible from the evaporation source (aminimum of 10" or 25.4 cm) while still being in a position to accumulate thickness
at a rate proportional to accumulation on the substrate. Figure 2-2 shows properand improper sensor positioning.
Figure 2-2 Sensor Installation Guidelines

Correct
Incorrect

Obstruction

Correct

Incorrect

Incorrect074-398-P1A

SourceTo guard against spattering, use a source shutter to shield the sensor during theinitial soak periods. If the crystal is hit with even a minute particle of moltenmaterial, it may be damaged and stop oscillating. Even in cases when it does notcompletely stop oscillating, it may immediately become unstable, or shortly after
deposition begins instability may occur.
Plan the installation to insure that there are no obstructions blocking a direct path
between the sensor and the source.
Install sensors in such a manner that the center axis of the crystal is aimed directlyat the source to be monitored. Verify that the angle of the sensor location (withreference to the source) is well within the evaporant stream.
Attach the sensor with a mounting bracket anchored to the deposition chamber.
With the bracket in place, temporarily position and attach the sensor head as
outlined in the general guidelines above. Next, temporarily install the feedthrough.
You may now form, measure, and mark the sensor’s tubes (use the bending tool
(IPN 750-036) to form tubes in the system).

2-5

Crystal12 Sensor Operating Manual

Build the Sensor/Feedthrough Assembly. Remove the sensor and the feedthrough,cut the water cooling tubes and air tubes to the proper length and connect them
directly to the feedthrough or use vacuum rated couplings.

CAUTIONTo prevent damage to the feedthrough or sensor during
welding or brazing, insure that at least one inch of watertube is left between the sensor and the feedthrough.
After cutting the water and air tubes, verify that they are clear of metal particles by
forcing compressed air through the tubing. Heliarc welding is recommended (torch
brazing may also be acceptable) for connecting the sensor to the feedthroughwater tube.
Vacuum rated connectors such as CAJON® are recommended for use between
the sensor and the feedthrough to speed maintenance. If brazing adapters are to
be used, attach them to the sensor water-cooling tubes prior to connection to thefeedthrough. Make connections as follows:

1 Clean the water tube and adapter surfaces with solvent if necessary.
2 Apply brazing flux to surfaces being joined.
3 Braze the connections using a flame temperature appropriate for the brazing
material being used.

CAUTION

4 Verify that each joint is not blocked by blowing compressed air through thecooling tubes.

5 Thoroughly clean the braze joint and helium leak test before installing thesensor and feedthrough into the process chamber.
Once all water and air tube connections are fabricated, install the sensor andfeedthrough assembly into the process system and secure all retaining hardware.
Shield the coax cable from heat radiating from the evaporant source or thesubstrate heater. You can do this very simply, if your process allows, by wrappingaluminum foil around the cable and water tubes. Connect the external water tubes
from the feedthrough to your water supply system and flow controller. We
recommend using detachable couples (Swagelok® or equivalent) for external
water tube connections. Apply water pressure to verify flow and tightness.

2-6

074-398-P1A

Excessive application of brazing material, or excessive
heat due to brazing, may result in blockage of the watertube.

Crystal12 Sensor Operating Manual

Because of geometric factors, variations in surface temperature, and differences inelectrical potential, the crystal and substrates often do not receive the sameamount of material. If you want the thickness indication on the controller torepresent the thickness on the substrates, calibration is required to determine thetooling. Consult your controller’s manual for the proper procedure for obtaining thetooling factor.

CAUTIONUse of more than 80" (2 meters) of 1/8" tubing between
the valve and the bellows may cause a switcher failure
because of the time required to bleed out sufficient air
during de-pressurization. If tubing greater than 1/8" isused, the maximum length must be reduced proportional
to the additional volume.

2.4 Crystal12 Sensor Installation whenused with Cygnus
2.4.1 Changing Crystal Sensor Type andProgramming the Relay Outputs
1 Display the Hardware # Display (see Figure 2-3).
Figure 2-3 Display Tree for HARDWARE # Display.

ALL CHANNELS Display
F6 CHANNEL
074-398-P1A

CHANNEL # Display (# designates Channel number selected)
F1 Channel Parms
PROCESS # Display
F1 Hardware Parms
HARDWARE # Display

2-7

Crystal12 Sensor Operating Manual

2 Select Sensor Type: 1 (Single); 2 (CrystalTwo); 6 (CrystalSix); 12 (Crystal12).
See Figure 2-4.
Figure 2-4 Selecting Sensor Type Example

3 If a Sensor Type 2, 6 or 12 is selected, a Switch Output field appears. Selectthe relay output number to be used to activate the crystal switch. See Figure
2-5.

074-398-P1A

Figure 2-5 Selecting the Output Number Example

2-8Crystal12 Sensor Operating Manual

2.4.2 Wiring the Relay Outputs with Relay I/O Boards 760-162-G1 or
760-162-G1/G2
On the relay connector, connect the leads of the solenoid valve across the one sideof a 24 volt supply and one side of a relay (1-8, 1-16, or 1-24; whichever was
programmed). See Table 2-1.
Table 2-1 +24 V(dc) Pin Connections

Pin

Function

1

Return2Return3

Return4

Not Connected

5

Not Connected

6+24 Volts

7+24 Volts

8+24 Volts

9

Not Connected074-398-P1A

CAUTION
Both the isolated 24 V(dc) supply and the RS-232C
remote communications port use a 9-pin D-sub
connector. Care must be taken not to inadvertently
connect the RS-232C remote communications cable tothe 24-volt supply connector. Also, care must be taken
not to inadvertently connect the 24 V(dc) supply cable to
the RS-232C remote communications connector.
Connect a jumper between the second side of the 24 volt supply and the secondside of the selected relay. See Table 2-2.

2-9

Crystal12 Sensor Operating Manual

Table 2-2 Input/Relay Pin Connections

Relay #Pins

TTL
Input #

Pin

Relay

I/O Board #1

Pins

TTL
Input #Pin

I/O Board #3

1

7, 6

1

15

17

7, 6

25

9

2

9, 8

2

14

18

9, 8

26

10

3

11, 103

13

19

11, 1027

11

4

13, 124

12

20

13, 12

28

12

5

5, 4

5

11

21

5, 4

29

13

6

3, 2

6

10

22

3, 2

30

14

7

1, 14

7

9

23

1, 14

31

15

8

15, 168

8

24

15, 16

32

1

9

7

33

2

10

6

34

3

11

5

35

4

12

4

36

5

13

3

37

6

14

2

38

7

GND

1

GND

8

2 - 10

9

7, 6

15

15

10

9, 8

16

14

11

11, 101713

12

13, 12

18

12

13

5, 4

19

11

14

3, 2

20

10

15

1, 14

21

9

16

15, 16

22

8

23

7

24

6

25

5

26

4

27

3

28

2

GND

1

074-398-P1A

I/O Board #2

Crystal12 Sensor Operating Manual

2.5 Crystal12 Operation whenused with a Cygnus
2.5.1 Initialization
An automatic Rotate Head function occurs when the Cygnus is first powered on,
assuming that a channel's crystal Sensor Type is configured as a Crystal12.
HINT: It is important to perform a Rotate Head function after a carouselchange-out, or after changing the crystal sensor type.
Whenever a Rotate Head function is initiated, the Cygnus will advance the Crystal
12 carousel until it locates Position 1. After Position 1 is located, the Rotate Headfunction begins cataloging the crystals at each position as either good or failed.


Because Position 1 is unique, the Crystal 12 always ends on Position 1.

A Rotate Head function could require as many as 11 pulses to initially findposition 1 and an additional 12 pulses to catalog the crystals (total maximum
number of pulses for initialization is 23).



A Rotate Head function can only be done when the Channel is in READY or
STOP state.

A Crystal Switch will also identify a crystal in the new position as either "good" or"failed".

074-398-P1A

Because only Position 1 is uniquely identified, if the Crystal 12 is manually moved
we do not guarantee correct position detection.


Example 1. If the Crystal 12 head were moved manually from Position 2 to
Position 5, Cygnus would not detect the difference. When a switch is done,
Cygnus would advance the Crystal 12 to Position 6, and assume it was Position
3 as these two positions are not uniquely identified.



Example 2. Once a position is reached, Cygnus assumes the Crystal 12
remains on that position until a Crystal Switch or a Rotate Head function is
initiated.

2.5.2 Crystal Switching
A Crystal 12 requires one pneumatic pulse to change position. Upon a crystal
switch, the Crystal Switch Output relay will close for one second and then open.
One second after the relay is opened, the crystal switch function is considered
complete. Cygnus then looks for the appropriate crystal position.
After completion of the crystal switch, there is a short delay of about 5 seconds
before the crystal frequency information is used. This delay insures good frequency
reading by allowing time for the crystal to come to thermal equilibrium after being
exposed to the material source.

2 - 11Crystal12 Sensor Operating Manual

If a crystal switch is initiated while the Cygnus Channel is in Deposit, the Crystal12
will advance to the next "good" crystal, skipping the failed crystals.
If a crystal switch is initiated and the Channel is not in Deposit, the Crystal12 will
advance to the next position regardless of the status (good or failed) of the crystal
in this position.
If a Start command is given to the Channel and the Crystal12 is currently on a failed
crystal the instrument will automatically crystal switch to the next known good
crystal before entering Deposit.
If the last known good crystal fails while in Deposit, the Channel will go into TimePower, Idle Ramp, or Stop, depending on the value of the Channel's "CRYSTALFAIL OPTION" parameter.

2.6 Crystal12 Sensor Requirement when
Not Installed with a Cygnus
The Crystal12 can be manually operated with other Deposition Controllers. The
user must, however, be aware of the functional requirements for operation. These
include, but are not limited to:

1 The three-way solenoid valve assembly must be energized and de-energizedonce per crystal position. Twelve pulses complete one revolution.

2 The electrical pulse applied to the solenoid valve must be at least one secondin duration during both the pressurization (energized) and de-pressurization(de-energized) phase.

3 A 24 volt AC or DC supply is required to energize the solenoid assembly.
Consult Figure 3-1 on page 3-3 for wiring assignments.
crystals when initially loaded, and quantity of good crystals remaining at anytime.

5 Follow the guidelines shown in section 2.3 on page 2-3 for installation.
6 You will need to keep track of the total thickness as a manually generated sumof the deposit accumulated at each crystal position.

2 - 12074-398-P1A

4 The user should provide some means of determining the quantity of “good”

Crystal12 Sensor Operating Manual

Chapter 3
Installation of the Solenoid Valve Assembly
The solenoid valve assembly (IPN 750-420-G1) and the feedthrough should beinstalled at the same time. The same valve assembly is used for both the 1" andthe (recommended) 2 3/4" feedthroughs. However, if the assembly is to be usedwith the 2 3/4" feedthrough, you will need to modify the valve bracket as follows.
For the following steps, see Figure 3-2 on page 3-4. (DWG. 750-420-G1)

1 Align the score line on the valve assembly bracket (item 5) over the edge of atable or other square edge.

2 Using pliers, grasp the part of the bracket extending over the edge and push
down. The bracket will break along the score line. Use a file to smooth any
rough edges which occur along the break.
NOTE: In order for the Crystal12 sensor to operate properly, a .022" diameterorifice (IPN 059-189 provided in Kit 750-268) must be installed in line
between the air supply and the solenoid valve assembly. This isaccomplished by the following procedure. See Figure 3-1 on page 3-3.

3 Unthread the tube fitting attached to the normally closed (N.C.) P Supply portof the 3-way solenoid valve.

4 Install the orifice by threading it into the normally closed (N.C.) port of the 3-way
solenoid valve.

5 Thread the tube fitting previously removed into the orifice.

074-398-P1A

NOTE: Do not install the orifice into the normally open output port. This will requirea longer time interval for depressurization of the bellows assembly andmay lead to an apparent sensor failure.

3.1 Installation with 1” Bolts
Installation of the solenoid valve assembly for the Crystal12 sensor requires one 1"bolt feedthrough (IPN 750-030-G1, see Figure 5-1 on page 5-1).
Follow these steps:

1 Ensure that the o-ring is in place on the bolt. Insert the 1" bolt such that thehexagonal shaped end of the bolt is on the vacuum side of the chamber.

2 Add the Bracket.
3 Add the Washer.
4 Add the Nut.
5 Tighten the feedthrough nut.

3-1

Crystal12 Sensor Operating Manual

6 Add the air fitting to the tube which has the female thread adapter installed.
7 Connect 1/8" diameter tubing from the valve output (A) to the feedthroughfitting.

CAUTIONUse of more than 80" (2 meters) of 1/8" tubing between
the valve with the orifice and the bellows may cause aswitcher failure because of the time required to bleed out
sufficient air during de-pressurization. If tubing greaterthan 1/8" in diameter is used, the maximum length must
be reduced proportional to the additional volume.

8 Attach the valve’s supply (normally closed (NC) port) to the 80-90 PSIG (5.5 bar- 6.2 bar) [550 kPa - 620 kPa] source of air. Verify that the orifice (IPN 059-189)
has been installed into this NC valve port. (See Figure 3-1b of Figure 3-1 onpage 3-3.)

3.2 Installation with 2 3/4” FeedthroughInstallation of the solenoid valve requires a 2 3/4" feedthrough inclusive of two
coaxial feedthroughs (IPN 002-080, see Figure 5-2 on page 5-2). The second
coaxial feedthrough is not used, and should be protected from damage as a resultof process material. Follow the steps below:

1 Install the Feedthrough.
2 Add the valve bracket (modified) to the desired location as illustrated in Figure
3-3 on page 3-5.

4 Install the air fitting to the female thread adapter.
5 Connect 1/8" diameter tubing from the valve output (A) to the feedthroughfitting. See the CAUTION in section 3.1 above.

6 Attach the valve’s supply (P) (normally closed (NC) port) to the 80-90 PSIG (5.5bar - 6.2 bar) [550 kPa - 620 kPa] source of air. Verify that the orifice (IPN059-189) has been installed into this NC valve port. (See Figure 3-1b of Figure
3-1 on page 3-3.)
NOTE: Maximum temperature for the solenoid valve assembly is 105 °C for
bakeout and operation.

3-2

074-398-P1A

3 Tighten the feedthrough bolts.

Crystal12 Sensor Operating Manual

3.3 Electrical and Pneumatic Connections
3.3.1 Electrical
To complete installation of the assembly, make electrical connections whereindicated in Figure 3-3 on page 3-5 to either 24 V(ac) or V(dc). Current required isapproximately 70 mA.

CAUTION
Maximum applied voltage must not exceed 26 V(ac)3.3.2 Pneumatic Solenoid Tube Connections
Figure 3-1 Pneumatic Solenoid Tube Connections
Figure 3-1aSolenoid Valve
Without Orifice(As Supplied)

80-90 PSIGAIR SUPPLYEXHAUST(Normally Open)P SUPPLY(Normally Closed)

A OUTPUTPORT

TO AIR
FITTING OF
FEEDTHROUGH

A OUTPUTPORT

TO AIR
FITTING OF
FEEDTHROUGH

074-398-P1A

TUBE FITTING(Provided with Valve)
Figure 3-1b
Solenoid ValveWith Orifice(Installed by User)
Figure 3-1b shows the proper installation for
all CrystalSix and Crystal12 applications.

80-90 PSIGAIR SUPPLYP SUPPLY(Normally Closed)

TUBE FITTING(Provided with Valve)

EXHAUST(Normally Open)ORIFICE (059-189)(Provided with Accessory Kit 750-268)

3-3

074-398-P1A

Figure 3-2 Solenoid Valve Assembly

Crystal12 Sensor Operating Manual3-4Figure 3-3 2 3/4” Dual Coaxial Feedthrough & Valve Assembly

074-398-P1A

Crystal12 Sensor Operating Manual

3-5

Crystal12 Sensor Operating Manual

074-398-P1A

This page is intentionally blank.

3-6

Crystal12 Sensor Operating Manual

Chapter 4
Maintenance
4.1 General Precautions
4.1.1 Maintain the Temperature of the Crystal
Periodically measure the water flow rate through the crystal sensor to verify that itmeets or exceeds the value specified in chapter one. Depending upon thecondition of the cooling water used, the addition of an inline water filtering cartridge
system may be necessary to prevent flow obstructions. Many coating systems use
parallel water supply taps that provide high total flows. An obstruction or closed
valve in the pipe that supplies water to the sensor head would not result in a
noticeable reduction of total flow. The best test is to directly monitor the flow leaving
the sensor.
The crystal requires sufficient water cooling to sustain proper operational andtemperature stability. Ideally, a constant heat load is balanced by a constant flow ofwater at a constant temperature. INFICON quartz crystals are designed to provide
the best possible stability under normal operating conditions. No crystal cancompletely eliminate the effects of varying heat loads. Sources of heat variation
include radiated energy emanating from the evaporant source and from substrateheaters.

4.1.2 Use the Optimum Crystal Type074-398-P1A

Certain materials, especially dielectrics, may not adhere strongly to the crystal
surface and may cause erratic readings. For many dielectrics, adhesion is
improved by using crystals with silver coated electrodes. Gold is preferred for otherapplications.

4.1.3 Crystal Concerns when Opening the Chamber
Thick deposits of some materials, such as SiO, Si and Ni will normally peel off thecrystal when it is exposed to air, due to changes in film stress caused by gas
absorption. When peeling material is observed, replace the crystal.

4-1

Crystal12 Sensor Operating Manual

4.2 Crystal Seat MaintenanceIn dielectric and organic material coating applications, the surface where the crystal
contacts the crystal seat may require periodic cleaning. Since most dielectrics are
insulators, any buildup due to blow-by will eventually cause erratic or poor electricalcontact between the crystal and the sensor body. This buildup will also cause areduction in thermal transfer from the crystal to the sensor body. Both of these will
result in noisy operation and early crystal failure.
Cleaning may be accomplished by gently buffing the crystal seating surface with awhite Scotch-Brite™ pad followed by an ultrasonic bath in soap solution followedby thorough rinsing in deionized water and drying or by ultrasonic cleaning andrinsing only.

CAUTION
The crystal seating surface is machined to a very finefinish (16 micro inches rms). This high quality finish isessential to provide good electrical and thermal contact
with the crystal. Applying excessive force during
cleaning or using overly abrasive cleaning materials may
damage this finish and reduce sensor performance.

4.3 Alignment Instruction for Crystal12 Sensor (IPN 750-667)

The unit shipped to you has been aligned at the factory, no further alignment isrequired.
NOTE: Realignment is only required if the unit has been disassembled for any
reason, such as evaporant material removal, or any electrical problem that
may occur, or if the ratchet (item 29, Figure 1-5 on page 1-8) is loosened,or removed. This procedure is critical and must be carefully followed.
The unit, when properly aligned, will index the crystal to a position that is closely
centered within the aperture provided in the front deposition shield. The unit mustbe aligned if this condition does not exist.

4.3.1 Required Equipment

4-2

5/64" allen wrench (Included in 750-268 Kit)



1/16" allen wrench (Included in 750-268 Kit)



3/32" allen wrench (Included in 750-268 Kit)

074-398-P1A

During shipment, units may vibrate slightly out of position. This does not mean
realignment is required. The unit will return to the centered position the first time itis pneumatically activated.

Crystal12 Sensor Operating Manual

Alignment tool assembly 750-254-G2 (Included in 750-268 kit)Regulated air supply 80-90 PSIG (5.5 bar - 6.2 bar) [550 kPa - 620 kPa]
NOTE: 75 PSIG (5.2 bar) [520 kPa] is for alignment purposes only.

4.3.2 Procedure
With the required equipment at hand, proceed as follows:

1 Temporarily connect an air supply to the bellows assembly (item 37, Figure 1-5
on page 1-8) supply tube. Regulate the air pressure to 75 PSIG (5.2 bar) [520kPa].

2 Insert the 0.09375" diameter alignment pin (of the 750-254-G2 assembly) in thealignment hole (if not already installed) as shown in Figure 4-1. The crystal
carousel may need to be rotated to achieve the alignment condition shown in
Figure 4-1.
Figure 4-1 Alignment Pin Installation

Crystal Carousel

0.09375 dia. Alignment Pin
750-254-G2

074-398-P1A

Front
Deposition
ShieldCarousel
Housing
Weldment

3 Remove the actuator cover (item 22, Figure 1-6 on page 1-9) and its related
hardware (items 6 and 7, Figure 1-6 on page 1-9).

4 Loosen the set screws (two set screws per item) of the ratchet (item 29, Figure
1-5 on page 1-8) and the stop ratchet (item 31, Figure 1-5 on page 1-8).

5 Loosen the #2 fastener (item 5, Figure 1-5 on page 1-8) that attaches the detent(item 25, Figure 1-5 on page 1-8) to the bellows assembly item 37, Figure 1-5
on page 1-8). Do NOT remove detent.

4-3

Crystal12 Sensor Operating Manual

6 Actuate the bellows assembly by applying 24 volts to the leads of the solenoid
valve of the solenoid valve assembly. Consult Figure 3-3 on page 3-5 for wiring
assignments. The air pressure must be sustained.

7 Rotate the ratchet (item 29, Figure 1-5 on page 1-8) counterclockwise until one
tooth contacts the pin of the pawl and actuator stem assembly (item 18, Figure
1-4 on page 1-7). Secure the ratchet to the 0.25" diameter shaft of the carousel
spindle body (item 24, Figure 1-5 on page 1-8) utilizing the #6-32 x 0.125" longsocket set screw (item 12, Figure 1-4 on page 1-7).

8 Rotate the stop ratchet (item 31, Figure 1-5 on page 1-8) clockwise until it
contacts the stem of the pawl and actuator stem assembly (item 18, Figure 1-4
on page 1-7) as shown in Figure 4-2. Secure the stop ratchet to the 0.25”
diameter shaft of the carousel spindle body (item 24, Figure 1-5 on page 1-8)
utilizing the #6-32 x 0.125 long socket set screws (item 12, Figure 1-5 on page
1-8).
Figure 4-2 Setting the Stop Ratchetdetent (item 25, Figure 1-5 on page 1-8) and ratchet (item 29, Figure 1-5 onpage 1-8) as shown in Figure 4-3. Pull the detent against the detent spacing
tool and subsequently against the tooth of the ratchet. Tighten the #2 fastener(item 5, Figure 1-5 on page 1-8) to secure the detent to the bellow assembly.

4-4

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9 Position the detent spacing tool (of the 750-254-G2 assembly) between theCrystal12 Sensor Operating Manual
Figure 4-3 Setting the Detent

RatchetDetentSpacerDetent10 Remove the detent spacing tool.
11 Release air pressure from the bellows assembly (item 37, Figure 1-5 on page
1-8).

12 Remove the 0.09375" diameter alignment pin of the 750-254-G2 alignment tool
assembly from the hole.

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13 Press the crystal switch button on the handheld controller or the instrument
front panel. The sensor will advance to the next crystal position. Each crystal
should be centered in the aperture. Make certain the detent drops in to engage
each tooth of the ratchet (item 29, Figure 1-5 on page 1-8) on each pulse.

14 Secure the actuator cover (item 22, Figure 1-6 on page 1-9) to the carousel
housing weldment (item 14, Figure 1-5 on page 1-8) using two #4-40 x 0.187"
long socket head cap screws (items 6 and 7, Figure 1-6 on page 1-9).

15 Install the front deposition shield (item 17, Figure 1-5 on page 1-8) by firstorienting the pins in the front deposition shield to coincide with the locating
holes in the carousel housing weldment (item 14, Figure 1-5 on page 1-8), thensecure the front deposition shield by tightening the two knurled captive screws.

16 Regulate the air supply to 80-90 PSIG (5.5 bar - 6.2 bar) [550 kPa - 620 kPa]for operation.
The Crystal12 Sensor is now aligned.

4-5Crystal12 Sensor Operating Manual

4.3.3 Replacing the Bellows Assembly (750-286-P2)
Replace the bellows assembly with INFICON part number 750-286-P2. This will
require the removal of the used bellows assembly and reattachment of thereplacement bellows assembly to the feedthrough airline (refer to section 1.1.1,
Installation Requirements, on page 1-2).
4.3.3.1 Equipment required:

1/16" Allen wrench (Included in 750-268 kit)

3/32" Allen wrench (Included in 750-268 kit)

4.3.3.2 Procedure

1 Remove the two #4 fasteners (item 7, Figure 1-6 on page 1-9) that secure theactuator cover (item 22, Figure 1-6 on page 1-9) to carousel housing weldment(item 14, Figure 1-5 on page 1-8).

2 Remove the actuator cover. Remove the front deposition shield (item 17,
Figure 1-5 on page 1-8) by unthreading the two knurled captive screws.

3 Remove the extension spring (item 27, Figure 1-4 on page 1-7) from the pawl
and actuator stem assembly (item 18, Figure 1-4 on page 1-7).

4 Remove the two #4 fasteners (item 9, Figure 1-4 on page 1-7) that secure thebellows assembly (item 37, Figure 1-5 on page 1-8) to the carousel housing
weldment (item 14, Figure 1-5 on page 1-8).

5 Carefully remove the bellows assembly. The pawl and actuator stem assembly(item 18, Figure 1-4 on page 1-7) and the detent (item 25, Figure 1-5 on page1-8) will be removed with the bellows assembly.
1-7) from the bore of the Bellows assembly being replaced (item 37, Figure 1-5
on page 1-8) and install it into the replacement Bellows Assembly. Continue tothread the Pawl and Actuator assembly until the shoulder of the Actuator stem
is approximately 0.034" away from the bellows assembly. This distancespecification is for reference only — the actuator stem position may need to be
adjusted to obtain the desired condition as illustrated in Figure 1-4 on page 1-7.

7 Remove the Detent and related hardware (items 1, 3, 5, 26, Figure 1-5 on page1-8) from the bellows assembly and attach them to the replacement bellows
assembly. Do not tighten the fastener. Discard the used Bellows Assembly.

8 Using the 1/16" allen wrench, loosen the set screws (item 12, Figure 1-4 onpage 1-7) that secure the ratchet (item 29, Figure 1-5 on page 1-8) and the stop
ratchet (item 31, Figure 1-5 on page 1-8) to the carousel spindle body (item 24,
Figure 1-5 on page 1-8).

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6 Unthread the Pawl and Actuator stem assembly (item 18, Figure 1-4 on pageCrystal12 Sensor Operating Manual

9 Fasten the replacement bellows assembly to the carousel housing weldment(item 14, Figure 1-5 on page 1-8) utilizing the two #4-40 x 1.125 long screws(item 9, Figure 1-4 on page 1-7). Do not tighten the screws. Position the
Bellows assembly in such a fashion as to allow the actuator stem to come incontact with the ball bearings (item 19, Figure 1-4 on page 1-7) as illustrated in
Figure 4-2 on page 4-4). Tighten the screws.

10 Attach the loop of the Extension spring to the hole provided in the Pawl of the
Pawl and Actuator assembly.

11 Position the Ratchet (item 29, Figure 1-5 on page 1-8) such that it engages thepin of the Pawl and Actuator Stem Assembly.

12 Position the detent (item 25, Figure 1-5 on page 1-8) so that it engages the
Ratchet (item 29, Figure 1-5 on page 1-8).
The unit is now ready to be aligned, refer to section 4.3 on page 4-2 for alignment
instructions.

4.3.4 Replacing the Electrical Connection Assembly
Replace the electrical connection assembly with INFICON part number
750-649-G1.
NOTE: Contact INFICON for pricing and availability of new and refurbishedassemblies.
The recommended replacement interval for the electrical connection assembly is
two years, based upon five revolutions per week of the carousel.
4.3.4.1 Equipment Required074-398-P1A



3/32" Allen wrench#1 Phillips screw driver

4.3.4.2 Procedure
Reference Figure 1-5 on page 1-8 and Figure 1-6 on page 1-9.

1 Remove the #4 fasteners (item 7) that secure the actuator cover (item 22) tothe carousel housing weldment (item 14).

2 Remove the actuator cover.
3 Unthread the in-vacuum sensor head cable from the electrical connector.
4 Remove the two #4 Phillips flat head screws (item 8) that secure the electricalconnector assembly (item 16) to the carousel housing weldment.

5 Remove the electrical connector assembly and install the replacement
assembly utilizing the two #4 Phillips flat head screws.

6 Re-attach the in-vacuum head cable to the electrical connector.
7 Reinstall the actuator cover.
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Crystal12 Sensor Operating Manual

4.4 Cygnus Status and Error Messages
CAROUSEL CHANGE-OUT
The crystal carousel assembly has been removed from a Crystal12 sensor.
SWITCH IN PROGRESS
The manual state can not be exited while a crystal switch is in progress.
XTAL SWITCH ERRORThis message indicates a CrystalSix or Crystal12 sensor switcher failure. The
instrument did not detect the proper position after having attempted to rotate
the sensor head.
XTAL SWITCHING
Indicates a crystal switch is in progress.

4.5 Troubleshooting the Crystal12 Sensor
Table 4-1 Troubleshooting

Cause

Crystal fail signal on front Damaged Crystal.
panel of unit will not
Loss of electrical signal.
disappear even though
crystal can be seen
through deposition shield
aperture.

RemedyReplace crystal.
Check for electricalcontinuity between
feedthrough and torsion
spring of the electricalconnection assembly.
Check for electricalcontinuity between
contact post and leaf
spring of individual crystal
positions.

Unit will not advance when Loss of pneumatic supply, Establish air supply andor pressure is insufficient regulate to 80-90 PSIG
crystal switch key is(5.5 bar - 6.2 bar) [550 kPa
pressed. Xtal Switch Error for proper operation.
- 620 kPa] for operation.
message displayed

4-8Operation has been
impaired as a result of
peeling of the material
accumulated on the faceof the aperture plate.

Remove accumulatedmaterial.

Absence of orifice inairline.

Check for orifice, see
Chapter 3.

Grounding leaf springs
which contact carousel
may be damaged.

Replace grounding leaf
spring.

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SymptomCrystal12 Sensor Operating Manual
Table 4-1 Troubleshooting (continued)

Symptom

Cause

RemedyCrystal not centered inaperture.

Improper alignment.

Realign per alignment
instructions in Chapter 4.

Install orifice where shown
0.0225” diameter orifice
not installed inline to the on Figure 3-1 on page 3-3.
supply side of the solenoid
valve assembly.
Large jumps of thickness Mode hopping due toreading during deposition damaged crystal.

Replace crystal.

Crystal near the end of its Replace crystal.
life.
Scratches or foreign
particles on the crystal
holder seating surface.

Clean, polish the crystal
seating surface of thecrystal carousel. Refer tosection 4.2 on page 4-2.

Insufficient crystal
cooling.

Check water flow andtemperature. Refer tosection 1.1.1.3 on page
1-2.

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Crystal ceases to oscillate Crystal is being hit byduring deposition before it small droplets of molten
reaches its “normal life.
material from theevaporation source.

Move the sensor further
away from the evaporantsource.

Damaged crystal.

Change crystal.

Deposition material
built-up on edge of thecrystal carousel apertureplate and touching the
crystal, partially masking
full crystal area.

Clean the crystal carousel
aperture plate.

Crystal does not oscillate Defective or damaged
or oscillates intermittently crystal.
(both in vacuum and in
Existence of electricalair).
short or poor electricalcontacts.

Insufficient crystal
cooling.

Replace crystal.
Check for electricalcontinuity and short insensor cable, electricalconnection assembly,
feedthroughs, and crystal
carousel.
Check water flow andtemperature. Refer tosection 1.1.1.3 on page
1-2.

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Crystal12 Sensor Operating Manual
Table 4-1 Troubleshooting (continued)

Symptom

Cause

RemedyCrystal oscillates in
Crystal was near the end Replace crystal
vacuum but stops
of its life; opening to air
oscillation after open to air. causes film oxidation,
which increases film
stress.

Thermal instability: large Crystal not properly
seated.
changes in thickness
reading during source
warm-up (usually causes
thickness reading to
Excessive heat input todecrease) and after thethe crystal.
termination of deposition(usually causes thickness
reading to increase)

Poor thickness
reproducibility

Turn off cooling water tosensor before opening it toair; flow hot water throughthe sensor when thechamber is open.
Check and clean crystal
seating surface of thecrystal carousel. Refer tosection 4.2 on page 4-2.
If heat is due to radiationfrom the evaporation
source, move sensor
further away from source
and use sputtering
crystals for better thermal
stability.

No cooling water.

Check cooling water flow
rate. Flow rate should be aminimum of 150-200
cc/min @ 30 °C max.

Erratic source emission
characteristics.

Move sensor to a different
location; check theevaporation source forproper operating
conditions; insure
relatively constant poolheight and avoid tunnelinginto the melt.

Material does not adhere Check the cleanliness ofto the crystal.
the crystal surface;evaporate an intermediate
layer of proper material on
the crystal to improveadhesion.
Carousel Change-Out and Open circuit.
Xtal Fail messages remain
after installing carousel.

4 - 10Initiate a Crystal Switch or
Rotate Head function.

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Excessive moistureaccumulation on the
crystal.

Crystal12 Sensor Operating Manual
Table 4-1 Troubleshooting (continued)

Symptom

Cause

Resistor is open at
While in Ready or Stop,
initiating a Crystal Switch bypassed position(s).
function causes unit toindex more than once.
Unit indexes twelve times
and displays Xtal Switch
Error, Xtal Fail, andCarousel Change-Out
message.

Loss of electrical signal
Resistor #1 is open /shorted.
No carousel installed

RemedyRepair resistor at
bypassed position of
750-652-G1 (item 15 of
Figure 1-5 on page 1-8).
Or, contact INFICON.
Check for electricalcontinuity and isolation.

Install carousel

074-398-P1A

Torsion spring of electrical Replace electricalconnection assembly
connection assembly.
broken.
Refer to section 4.3.4 on
page 4-7

4 - 11Crystal12 Sensor Operating Manual

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4 - 12

Crystal12 Sensor Operating Manual

Chapter 5
Feedthrough Outline Drawings
The following Feedthrough Outline Drawings provide dimensions and otherpertinent data necessary for planning equipment configurations.

074-398-P1A

Figure 5-1 1" Crystal feedthrough w/airtube (lPN 750-030-GI)(contains one coaxial, two water tubes and one air tube)

5-1

Crystal12 Sensor Operating Manual

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Figure 5-2 Standard 2 3/4" CONFLAT® flange (002-080)(contains two coaxials, two water tubes and one air tube)

5-2