nano Motion Technology

Single-Axis Z Direct-Drive
Nanopositioning Stages

ANT130-L-Z Series

Nanometer performance in a large travel
format (35 and 60 mm)

NANO Technology

ANT130-L-Z SeriesHigh resolution (2 nm), repeatability (75 nm),and accuracy (300 nm)
In-position stability of <2 nm
Anti-creep crossed-roller bearings
High dynamic performance

Aerotech’s ANT series stages are the world’s first nanometerlevel positioning systems with greater than 25 mm travel. The
ANT130-L-Z and ANT130-L-Z-PLUS crossed-roller stages arethe best-in-class in combining speed, accuracy, resolution,
repeatability, reliability, and size, and are offered in two
accuracy grades. As an evolution of the ANT stage family,
these linear stages exhibit enhanced motion performance overAerotech’s first generation ANT series.

Noncontact Direct-Drive
All of the original ANT series’ direct-drive advantages havebeen preserved in the ANT130-L-Z family. Only noncontact
direct-drive technology offers the robust, accurate, and highspeed positioning necessary for mass production of precision
devices. ANT130-L-Z stages utilize advanced direct-drive
technology pioneered by Aerotech to achieve the highestlevel of positioning performance for high-precision positioning,disk-drive fabrication, fiber alignment, optical delay element
actuation, sensor testing, and scanning processes that demandsmooth and precise motion.
The ANT130-L-Z stages use a nearly frictionlesscounterbalance mechanism to maintain performance levels
while minimizing motor heating. The counterbalance is useradjustable from 0 to 10 kg.

more axes can be easily combined for flexible system designs
and multi-axis configurations.

System Characteristics
Outstanding accuracy, position repeatability, and in-position
stability require high system resolution. The ANT130-L-Z
stage’s industry-leading 2 nm minimum incremental step size
provides this high level of performance. Excellent in-position
stability is assisted by high-quality, anti-creep, crossed-roller
bearings. The stage offers virtually maintenance-free operation
over the life of the product. Aerotech’s direct-drive technology
has no hysteresis or backlash, enabling accurate andrepeatable nanometer-scale motion.
22201816Position (nm)Introduction

14121086420205101520Time (s)2530Flexible System Design
The ANT130-L-Z family has universal mounting and tabletop
patterns that allow for easy system integration. Two, three, or

ANT130-60-L-Z-PLUS 2 nm step plot with 100 Hz filter. Best-inclass resolution and exceptional in-position stability for large travel
stages.

www.aerotech.com

75NANO Technology
ANT130-L-Z Series

ANT130-L-Z/ANT130-L-Z-PLUS Series SPECIFICATIONS
Mechanical
Specifications

ANT130-035-L-Z ANT130-035-L-Z-PLUS ANT130-060-L-Z ANT130-060-L-Z-PLUS

TravelAccuracy(1)

35 mm

35 mm

60 mm

60 mm

±3 µm (±120 µin)±300 nm (±12 µin)

±3 µm (±120 µin)±300 nm (±12 µin)

Resolution

2 nm (0.08 µin)

2 nm (0.08 µin)

2 nm (0.08 µin)

2 nm (0.08 µin)

Repeatability (Bi-Directional)(1)±100 nm (±4 µin)

±75 nm (±3 µin)±100 nm (±4 µin)

±75 nm (±3 µin)

Repeatability (Uni-Directional)±50 nm (±2 µin)

±50 nm (±2 µin)

±50 nm (±2 µin)

±50 nm (±2 µin)

Straightness(1)±2.0 µm (±80 µin)±2.0 µm (±80 µin)±2.0 µm (±80 µin)±2.0 µm (±80 µin)

Flatness(1)±2.0 µm (±80 µin)±2.0 µm (±80 µin)±2.0 µm (±80 µin)±2.0 µm (±80 µin)

Pitch

10 arc sec

10 arc sec

10 arc sec

10 arc sec

Roll

10 arc sec

10 arc sec

10 arc sec

10 arc sec

Yaw

5 arc sec

5 arc sec

5 arc sec

5 arc sec

200 mm/s (8 in/s)

200 mm/s (8 in/s)

200 mm/s (8 in/s)

200 mm/s (8 in/s)

Maximum Acceleration

1 g - 10 m/s2
(No Load)

1 g - 10 m/s2
(No Load)

1 g - 10 m/s2
(No Load)

1 g - 10 m/s2
(No Load)

In-Position Stability(2)<2 nm (<0.08 µin)

<2 nm (<0.08 µin)

<2 nm (<0.08 µin)

<2 nm (<0.08 µin)

23 N

23 N

23 N

23 N

10 kg (22 lb)

10 kg (22 lb)

10 kg (22 lb)

10 kg (22 lb)

Maximum Speed

Maximum Force (Continuous)
Load Capacity(3)VerticalMoving Mass

1.2 kg (2.6 lb)

1.2 kg (2.6 lb)

1.4 kg (3.1 lb)

1.4 kg (3.1 lb)

Stage Mass

4.3 kg (9.6 lb)

4.3 kg (9.6 lb)

5.2 kg (11.5 lb)

5.2 kg (11.5 lb)

Aluminum Body/Black Hardcoat Finish

Material
MTBF (Mean Time
Between Failure)

30,000 Hours

Notes:
1. Certified with each stage.
2. In-Position Jitter listing is 3 sigma value.
3. Axis orientation for on-axis loading is listed.
4. Air supply must be clean, dry to 0Â°F dew point and filtered to 0.25 Î¼m or better; recommend nitrogen at 99.9% purity. Supply pressure is determined by the amount of payload
carried by the stage.
• Specifications are per axis, measured 25 mm above the tabletop. Performance of multi-axis systems is payload and workpoint dependent. Consult factory for multi-axis or non-standardapplications.
• -PLUS requires the use of an Aerotech controller.

ElectricalSpecifications

ANT130-035-L-Z ANT130-035-L-Z-PLUS ANT130-060-L-Z ANT130-060-L-Z-PLUS

Drive System

Brushless Linear Servomotor

Feedback

Noncontact Linear Encoder±40 VDC

Maximum Bus Voltage
Limit Switches

5 V, Normally Closed

Home Switch

Near Center

Recommended
Controller

ANT130-035-L-Z ANT130-035-L-Z-PLUS ANT130-060-L-Z ANT130-060-L-Z-PLUS

A3200

Npaq-MXR
Npaq MR-MXH
Ndrive ML-MXH

Ensemble

Epaq-MXH
Epaq MR-MXH
Ensemble ML-MXH

Soloist

Soloist ML-MXH

Multi-Axis

Single Axis

Notes:
1. Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within
0.25ºC/24 hours. If this is not possible, alternate products are available. Please consult Aerotech Application Engineering for more information.

76

www.aerotech.com

500

1500
1250

400
Straightness Error (nm)

200
100
0100
200
300

500
2500250
500
750
1250

2010010Position (mm)

2030

1500
30

20

10010Position (mm)20

ANT130-060-L-Z-PLUS yaw, five runs, bi-directional. Highlyrepeatable, minimal yaw error enhances system positioning
accuracy.

302010010Position (mm)2030

ANT130-060-L-Z-PLUS straightness error, five runs, bi-directional.
Exceptional and highly repeatable performance is assured withminimal straightness error.

Pitch (arc sec)

ANT130-060-L-Z-PLUS accuracy and repeatability, five runs, bidirectional over an extended period of time shows the high level ofsystem accuracy and repeatability.

Yaw (arc sec)

750

1000

400

765432101234567301000

765432101234567302010010Position (mm)20

ANT130-L-Z Series

Position Error (nm)30050030NANO Technology

ANT130-L-Z/ANT130-L-Z-PLUS Series PERFORMANCE30

ANT130-060-L-Z-PLUS pitch, five runs, bi-directional. Excellent
repeatability/accuracy contribute to improved processing.

www.aerotech.com

77

A
1/2 HARDSTOPTRAVEL

12075
SQ
50
B
1/2 NORMALTRAVELANT130-L-Z Series

NANO Technology

ANT130-L-Z/ANT130-L-Z-PLUS DIMENSIONS

37.5
TYP

50SQHDMAXE

90125

FJ
GKC1/2 LIMITTRAVEL
1524
COUNTERBALANCE AIR SUPPLY[6MM TUBE]

65

CUSTOMER MOUNTING
921X M6x1.0[CENTERED ON CARRIAGE

1301304595146.650SQ

STAGE MOUNTING
6.6 THRU ALL
9X[CLEARANCE FOR M6 SHCS]REGULATOR KNOB FOR
COUNTERBALANCE ADJUSTMENT

101.6

25
TYP
66.7
133.4
MOTOR / FEEDBACKCABLE EXIT LOCATIONDIMENSIONS: MILLIMETERS

78

www.aerotech.com

ANT130-L-Z Series Vertical Stage
ANT130-L-Z
Aerotech nanotranslation crossed-roller vertical positioner
Linear Stage Travel
ANT130-035-L-Z
ANT130-035-L-Z-PLUS

ANT130-060-L-Z-PLUS

Options-25DU-4DU-25DU

Single 25-pin D (standard)
Motor 4-pin HPD; feedback 25-pin D

www.aerotech.com

ANT130-L-Z Series

ANT130-060-L-Z

35 mm vertical travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output
linear encoder and limits
35 mm vertical travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output
linear encoder and limits (High Accuracy Version)
60 mm vertical travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output
linear encoder and limits
60 mm vertical travel stage with proprietary direct-drive motor technology, 1 Vp-p sinusoidal output
linear encoder and limits (High Accuracy Version)

NANO Technology

ANT130-L-Z/ANT130-L-Z-PLUS Series ORDERING INFORMATION

79