23★MMC releases MemsONE commercial version 1.0 (Feb. 2008)★BEANS Project begins (July)★IEC TC47/WG4 upgraded to IEC SC47F (July)★MMC opens "MEMS Mall" (Oct.)★MMC opens "Micromachine Project Archive" (Jan. 2009)★BEANS Laboratory established (Mar.)★MMC opens MEMSPedia (June)

18th Exhibition Micromachine/MEMS held (July)

18th Exhibition 19th Exhibition
Tokyo Big Sight
Changes in sizeof exhibition venue

Micromachine/MEMS held

★MicroNano 2009, 20th Exhibition

Changes in numberof exhibition booths

H1N1 influenza virus pandemic (Apr.)

Obama J.D. inaugurated as U. S. President (Jan.)

Nobel Prize awarded to Prof. Nambu and two others (Oct.)Worldwide financial crisis (Sep.)★MicroNano 2007 held at Tokyo Big Sight (from this time onward)★Game unit equipped with acceleration sensor marketed (Dec.)★MEMS 2007 / 20th anniversary convention (Kobe) (Jan. 2007)

Name changed to 17th Exhibition Micromachine/MEMS (Nov.)(June)★MEMS-ONE Project begins★MEMS Project begins (Apr.)

17th Exhibition
TokyoInternational Forum

Postal services privatized (Oct.)

Many occurrences of deceptive food relabeling discovered (Aug.)

Pluto downgraded from planet to dwarf planet (Aug.)

13th Exhibition

One-segment broadcasting begins (Aug.)

Experimental wireless micromachine system
for inspection on inner surface of tube

Earthquake-resistant strength deception discovered (Nov.)

15th Exhibition★MMC opens MEMStation (July 2005)★IEC standard "MEMS Terms and Definitions" published (proposed by MMC) (Sep.)★MEMS Industry Forum established (March 2006) and merged with Federation of Micromachine Technology (May)★Fine MEMS Project begins (July)★IEC standards "Tensile test for thin film materials" "Standard test piece" (proposed by MMC) (August)★MicroNano 2006 held (Tokyo International Forum)★MEMS Park Consortium established (Oct.)(Mar. 2004)★AIST MEMS Business building completedmarketed (Dec.)
MEMS
2003 (Kyoto) held★
(Jan. 2003)

location (Kanda Sakumagashi)(Feb.)★MMC Foundry Services Industry
Committee established (July)★MMC office moved to present

completed (Mar.)★Micromachine project

Many micromachine project
achievements exhibited (Nov.)★11th Micromachine Exhibition

Optical matrix switch
developed / opticalscanner marketed★MEMS growth phaseshown at 8th Exhibition
Micromachine, MEMS 97(Nagoya) etc. (Jan.- Oct.)★MMC portable exhibits

IEC (International Electrotechnical Commission)
MMC becomes Japanese liaison (1995)

2F

Aichi Expo held (Mar.)

Silicon microphone

Chuetsu Earthquake (Niigata Prefecture) (Oct.)in Japan marketed (Oct.)★World's first silicon microphone

Optical matrix switch

Teito Rapid Transit Authority privatized (Apr.)

Terrestrial digital broadcasting begins (Dec.)

Human genome project completed (Apr.)

11th Exhibition

Nobel Prize awarded to Prof. Koshiba and Mr. Tanaka (Sep.)

12th Exhibition★MEMS foundry services begin one after another★64CH optical switch marketed (Apr. 2002)★First optical tunable attenuator

Experimental Catheter-type micromachine system
for repair in narrow complex areas
Examples of Micromachine Project Achievements

World Cup held in Japan and South Korea (May)1990 1991 1992 1993 1994 1995 1996 1997 1998 1999

Nobel Prize for Physics awarded to Prof. Noyori (Oct.)

Other topics

9/11 attacks in U. S. (Sep.)

Changes in number of exhibitor booths
held (Miyazaki)(Jan. 2000)

Changes in size of exhibition venue

BS digital broadcasting begins (Dec.)

9th Exhibition★MEMS 2000

Patent Office IPC "Microstructure technology /nanotechnology" (Jan. 2000)★Micromachine review department established inexhibition, namechanged to Exhibition
Micromachine (Oct.)★Beginning with 6th★Micromachine project team established within

moved to Kanda
Tsukasa-cho(June)★MMC officeat MEMS 94(Oiso) (Jan.)1990 1991 1992 1993 1994 1995 1996 1997 1998 1999

Nobel Prize for Chemistry awarded to Prof. Shirakawa (Oct.)"Aibo" domestic robot marketed (June)

Euro (EU currency integration) (Jan.)MMC report published (Oct.)★"Technical Terms Micromachine Technology"

standardization workshop in Japan
held (Oct.)Micromachine Exhibition(and subsequent ones
through 16th) held at
Science Museum (Apr.)★4th Industrial

Micromachine Exhibition
held at TEPIA(Aoyama)★3rd Industrial

Micromachine Exhibition
held in Nara, concurrently
with MEMS 91 (Jan.)★2nd Industrial

Micromachine Exhibition
held at Kikai Shinko
Kaikan (Mar.)★1st Industrial★Many microvalves and pumps exhibited

Portable exhibits

Google, Inc. established (Sep.)

6th Exhibition

Winter Olympics held in Nagano (Feb.)

Project (Phase 2)
begins (Apr.)★MITI Micromachine

Summit held(Mar.)★1st Micromachine★1st micromachine international

Micromachine Summit

COP3 Kyoto Protocol adopted (Dec.)"Tamagocchi" and "Pokemon" become popular (Apr.)"O157" infection / mass outbreak of food poisoning (July)"Dolly", world's first cloned sheep, born (July)

Earthquake
prediction system"Windows 95" released (Nov.)

4th Exhibition
Science Museum

Great Hanshin-Awaji Earthquake (Jan.)Art Contest held

★1st Micromachine

MMC in charge of running secretariat (Apr.)★Federation of Micromachine Technology established;

3rd Industrial Micromachine Exhibition

Nobel Prize for literature awarded to Mr. Oe (Oct.)

Website for prime minister's office established (Aug.)

Japan's first Internet service begins (July)

1st Exhibition

J-League founded (May)

Astronaut Mohri boards space shuttle (Sep.)(Jan.) Office opened in Mita,
Minato Ward (Apr.)★Micromachine Center (MMC) established★MITI Micromachine Project (Phase 1)
begins (Mar. 1991)

silicon cantilever AFM, flow-rate controller,
pressure sensor array, acceleration sensor andother achievements exhibited (1987-1990)★Dawn of MEMS Microgear/motor, comb actuator,

1st Industrial Micromachine Exhibition

Rio Summit held (June)

Carbon nanotubes discovered (June)

Gulf War begins (Jan.)Mr. Akiyama becomes Japan's first astronaut (Dec.)

Reunification of Germany (Oct.)

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