NANO Technology

ANT130-XY Seriesnano Motion Technology

Two-Axis XY Direct-Drive
Nanopositioning Stages
Integrated low-profile XY linear motor stage

AWARDS

ANT130-XY Series

Nanometer-level performance in a large
travel format
High resolution (1 nm), repeatability(75 nm), and accuracy (250 nm)
In-position stability of <1 nm
Anti-creep crossed-roller bearings
High dynamic performance with direct-drive
technology
ULTRA accuracy grade option

Introduction
The ANT130-XY series stages offer nanometer-level
performance in XY travels up to 160 mm. The integrated,sleek design provides an extremely low profile of only 85 mm.
The stage comes with proprietary direct-drive motor
technology, noncontact linear encoders, limits, integrated
cable management system, and three accuracy grades.

Ultra-Precise Stage Design
The ANT130-XY design allows critical elements such as
orthogonality, straightness, and flatness to be optimized,
resulting in a stage with exceptional geometric tolerances.
Aerotech’s direct-drive technology has no hysteresis orbacklash, enabling accurate and repeatable nanometer-scale
motion in both the X and Y dimensions. All travel options (60mm x 60 mm, 110 mm x 110 mm, 160 mm x 160 mm) comewith the 85 mm profile height. The integrated cablemanagement system is designed for long life and to minimizedrag forces.

Noncontact Direct-Drive
Only noncontact direct-drive technology offers the robust,
accurate, and high-speed positioning necessary for mass
production of precision devices. ANT130-XY stages utilize
advanced direct-drive technology pioneered by Aerotech toachieve the highest level of positioning performance. This
direct-drive technology is high-performance, non-cogging,noncontact, high speed, high resolution, and high accuracy.
This unique drive and bearing combination, packaged in an
extremely small-profile and footprint, offers tangible
advantages in many applications such as high-precision1

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positioning, disk-drive fabrication, fiber alignment, opticaldelay element actuation, sensor testing, and scanning
processes that demand smooth and precise motion.

Multi-Axis Configurations
The ANT130-XY can be combined with other Aerotech ANT
series products (vertical lift stages, direct-drive rotaries, andgoniometers) to create unique, high performance, multi-axis
systems.

ULTRA Accuracy Grade Option
In order to achieve the highest possible system accuracy fromour multi-axis nanopositioning systems, Aerotech hasdeveloped an advanced, dynamic trajectory calibration
system. To take advantage of this sophisticated calibration
system, the mechanical system has to be completely
assembled, functionally tested, and calibrated in our best-inclass metrology labs. Nanometer-level system accuracy can
only be achieved under stringent environmental conditions,calibrating with the best test equipment, using the highestprecision mechanical elements, and utilizing the ULTRA
software capabilities of Aerotech’s industry-leading controls.
By implementing ULTRA dynamic trajectory calibration with
the ANT130-XY, we are able to produce guaranteed
two-dimensional accuracies of ±250 nm or better.
The plots provided in the specifications illustrate performancedifferences between a standard ANT130-XY and the ULTRA
version. Straightness errors, orthogonality errors, andaccuracy errors caused by stage yawing are virtuallyeliminated.

ANT130-060-XY

Mechanical Specifications±2.5 µm±100 nm±25 nm±1.5 µm±1.5 µm
49 µrad (10 arc sec)
49 µrad (10 arc sec)
24 µrad (5 arc sec)
49 µrad (10 arc sec)

PLUS(1,2)
60 mm±250 nm
1 nm±75 nm±25 nm±1.5 µm±1.5 µm
49 µrad (10 arc sec)
49 µrad (10 arc sec)
24 µrad (5 arc sec)
15 µrad (3 arc sec)
350 mm/s (Upper Axis)
1 g - 10 m/s2 (No Load) (Upper Axis)
See graph for typical performance
See graph for typical performance
<1 nm
23 N
12.0 kg
1.5 kg
4.2 kg
5.5 kgAluminum Body/Black Hardcoat Finish
30,000 HoursULTRA(1,2)±250 nm±75 nm±25 nm±250 nm±1.0 µm
49 µrad (10 arc sec)
49 µrad (10 arc sec)
24 µrad (5 arc sec)
4.8 µrad (1 arc sec)

ANT130-XY Series

TravelAccuracy(2,3)
Resolution (Minimum Incremental Motion)
Repeatability (Bidirectional)(3)Repeatability (Unidirectional)
Straightness(3)Flatness(3)
Pitch
Roll
Yaw
Orthogonality
Maximum Speed(4)Maximum Acceleration(4)Speed Stability
Settling Time
In-Position Stability(5)Maximum Force (Continuous)
Load Capacity(6)Horizontal
Upper
Moving Mass
Lower
Stage Mass
Material
MTBF (Mean Time Between Failure)

NANO Technology

ANT130-XY Series SPECIFICATIONS

Notes:
1. -PLUS and -ULTRA require the use of an Aerotech controller.
2. Specifications for -BASE and -PLUS options are per axis measured 25 mm above the tabletop. Specifications for -ULTRA are XY measured 25 mm above the tabletop.
3. Certified with each stage.
4. Requires the selection of an appropriate amplifier with sufficient voltage and current.
5. In-position jitter listing is 3 sigma value.
6. Axis orientation for on-axis loading is listed.

ANT130-110-XY

Mechanical Specifications
TravelAccuracy(2,3)
Resolution (Minimum Incremental Motion)
Repeatability (Bidirectional)(3)Repeatability (Unidirectional)
Straightness(3)Flatness(3)
Pitch
Roll
Yaw
Orthogonality
Maximum Speed(4)Maximum Acceleration(4)Speed Stability
Settling Time
In-Position Stability(5)Maximum Force (Continuous)
Load Capacity(6)Horizontal
Upper
Moving Mass
Lower
Stage Mass
Material
MTBF (Mean Time Between Failure)

PLUS(1,2)

ULTRA(1,2)

110 mm
±4.0 µm±100 nm±25 nm±1.5 µm±1.5 µm
58 µrad (12 arc sec)
58 µrad (12 arc sec)
29 µrad (6 arc sec)
49 µrad (10 arc sec)

±300 nm
1 nm±75 nm±25 nm±1.5 µm±1.5 µm
58 µrad (12 arc sec)
58 µrad (12 arc sec)
29 µrad (6 arc sec)
15 µrad (3 arc sec)
350 mm/s (Upper Axis)
1 g - 10 m/s2 (No Load) (Upper Axis)
See graph for typical performance
See graph for typical performance
<1 nm
23 N
12.0 kg
2.1 kg
5.7 kg
7.4 kgAluminum Body/Black Hardcoat Finish
30,000 Hours±300 nm±75 nm±25 nm±300 nm±1.0 µm
58 µrad (12 arc sec)
58 µrad (12 arc sec)
29 µrad (6 arc sec)
2.4 µrad (0.5 arc sec)

Notes:
1. -PLUS and -ULTRA require the use of an Aerotech controller.
2. Specifications for -BASE and -PLUS options are per axis measured 25 mm above the tabletop. Specifications for -ULTRA are XY measured 25 mm above the tabletop.
3. Certified with each stage.
4. Requires the selection of an appropriate amplifier with sufficient voltage and current.
5. In-position jitter listing is 3 sigma value.
6. Axis orientation for on-axis loading is listed.

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2

NANO Technology

ANT130-XY Series SPECIFICATIONSANT130-160-XY

Mechanical Specifications-

PLUS(1,2)
160 mmULTRA(1,2)±5.0 µm±300 nm±300 nmTravelAccuracy(2,3)

1 nm

ANT130-XY Series

Resolution (Minimum Incremental Motion)
Repeatability (Bidirectional)(3)±100 nm±75 nmRepeatability (Unidirectional)±25 nm±25 nm±75 nm±25 nmStraightness(3)±2.0 µm±2.0 µm±300 nm±2.0 µm±2.0 µm±1.0 µm

Pitch

73 µrad (15 arc sec)

73 µrad (15 arc sec)

58 µrad (12 arc sec)Roll

73 µrad (15 arc sec)

73 µrad (15 arc sec)

58 µrad (12 arc sec)Yaw

39 µrad (8 arc sec)

39 µrad (8 arc sec)

29 µrad (6 arc sec)

Orthogonality

49 µrad (10 arc sec)

15 µrad (3 arc sec)

2.4 µrad (0.5 arc sec)

Flatness(3)350 mm/s (Upper Axis)

Maximum Speed(4)Maximum Acceleration(4)1 g - 10 m/s2 (No Load) (Upper Axis)

Speed Stability

See graph for typical performance

Settling TimeSee graph for typical performance<1 nm

In-Position Stability(5)23 N

Maximum Force (Continuous)
Load Capacity(6)Moving Mass

Horizontal

12.0 kg

Upper

2.4 kgLower

6.9 kg
8.9 kgStage Mass

Aluminum Body/Black Hardcoat Finish

Material

30,000 Hours

MTBF (Mean Time Between Failure)

Notes:
1. -PLUS and -ULTRA require the use of an Aerotech controller.
2. Specifications for -BASE and -PLUS options are per axis measured 25 mm above the tabletop. Specifications for -ULTRA are XY measured 25 mm above the tabletop.
3. Certified with each stage.
4. Requires the selection of an appropriate amplifier with sufficient voltage and current.
5. In-position jitter listing is 3 sigma value.
6. Axis orientation for on-axis loading is listed.

Electrical Specifications
Drive System

Brushless Linear Servomotor

Feedback

Noncontact Linear Encoder±40 VDC

Maximum Bus Voltage
Limit Switches

5 V, Normally Closed

Home Switch

Near Center

Recommended Controller
A3200
Multi-Axis

Single Axis

Npaq MXR
Npaq MR-MXH
Ndrive ML-MXH

Ensemble

Epaq MXH
Epaq MR-MXH
Ensemble ML-MXH
Ensemble LAB

Soloist

Soloist ML-MXH

Note: Linear amplifiers are required to achieve the listed specifications. Other options are available.

Note: To ensure the achievement and repeatability of specifications over an extended period of time, environmental temperature must be controlled to within
0.25°C/24 hours. If this is not possible, alternate products are available. Please consult Aerotech Application Engineering for more information.

3

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NANO Technology

ANT130-XY Series PERFORMANCE
11
10
9
8
Position (nm)7
6
5

ANT130-XY Series

4
3
2
1
0
1
0

5

10

15

20
Time (s)

25

30

35

3
2
1
0
-1
-2
-3
80

80
40

3
2
1
0
-1
-2
-3
80

80
40

40
0

40
0

0
-40
-80

0
-40

-40
-80

Position (mm)80100.1560
Position Error (nm)

100

100.2

100.05
100
99.95
99.9

-80

Position (mm)

ANT130-160-XY-ULTRA – exceptional 2D system accuracy with
Aerotech’s ULTRA version.

100.25

100.1

-40
-80

Position (mm)Position (mm)

ANT130-160-XY 2D accuracy plot showing planar accuracy error
including straightness, orthogonality, and stage yawing.

Velocity (mm/s)

Accuracy Error (μm)

Accuracy Error (μm)

ANT130-160-XY-PLUS lower axis 1 nm step plot with 100 Hz
filter. Best-in-class resolution and exceptional in-position
stability for large travel stages.

← 318 ms Move and Settle
Step Size: 60 mm
Speed: 350 mm/s
Settle Spec: ±20 nm

40
20
0
20
40
60

99.85
99.8

80

99.75

100
20

15

10

5
0
5
Position (mm)

10

15

20

ANT130-060-XY-PLUS velocity performance at 100 mm/s and 1 kg
payload for the X (lower) axis. This outstanding speed stability
enhances most scanning or laser machining applications.

0

200

400

600
800
Move Time (ms)

1000

1200

ANT130-060-XY-PLUS step and settle performance at full traveland 1 kg payload for the X (lower) axis. Industry-best settling
times significantly improve throughput for most applications.

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4NANO Technology

ANT130-XY Series PERFORMANCE
500

1500

400
Straightness Error (nm)Position Error (nm)

ANT130-XY Series

200
100
0
100
200
300
400

750
375
0
375
750
1125

500
80

60

40

20
0
20
Position (mm)

40

60

80

ANT130-160-XY-PLUS accuracy and repeatability, five runs, bidirectional for the Y (upper) axis. The total accuracy of ±75 nm
over 160 mm travel is significantly better than other offerings.

1500
80

Orthogonality (160) = -0.2 arc-sec

Yaw (arc sec)

Y Position (mm)

140
120
100
80
100,000X Magnification

60
40
20
0
0

20

40

60
80 100 120
X Position (mm)

140

160

180

ANT130-060-XY-ULTRA orthogonality. The inset is magnified
100,000X for clarity. The ULTRA model orthogonality is a twentyfold improvement over the BASE model orthogonality.

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60

40

20
0
20
Position (mm)

40

60

80

ANT130-160-XY straightness error comparison between the BASE
and ULTRA models shows a dramatic improvement in thisspecification.

180

5Standard
Ultra

1125

300

7
6
5
4
3
2
1
0
1
2
3
4
5
6
7
30

20

10

0
10
Position (mm)2030

ANT130-060-XY-PLUS Y (upper) axis yaw, five runs, bi-directional.
Highly repeatable, lowest angular error over full travel.

NANO Technology

ANT130-XY-BASE/-PLUS/-ULTRA DIMENSIONSANT130-XY Series

RAD. F
CABLE BEND RADIUS

25
12.7
D/2

21X M6X1.0
7.0
CENTER ON
CARRIAGE

C/2

25

50

8

6.8

75

120

DETAIL A
SCALE 2 : 5
MOUNTING HOLE TYP.
D/2

B/2
50
75
B/2

90

C/2

D/2

125

D/2

MODEL

A = STAGELENGTH

B = NOMINALTRAVELC = LIMITTRAVELD = HARDSTOPTRAVEL

E

F

ANT130-060-XY

180

60 X 60

66 X 66

75 X 7542~87.5

ANT130-110-XY

230

110 X 110

116 X 116

125 X 125

67

~100

ANT130-160-XY

280

160 X 160

166 X 166

175 X 17592~112.5

130

A

85

A
E

120

90

1. 200130A

1. ANT130-110-XY AND ANT130-160-XY ONLYDIMENSIONS: MILLIMETERS

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6NANO Technology

ANT130-XY-BASE/-PLUS/-ULTRA Mounting Plate DIMENSIONS

B

ANT130-XY Series

STAGE MOUNTING
M6 x 1.0 THRU

120

D

E

F

G

A

H

C

BREADBOARD MOUNTING
M6 OR 1/4-20 BOLTC'BORE SLOT

15

90

130

DIMENSIONS: MILLIMETERS

7

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NANO Technology

ANT130-XY-BASE/-PLUS/-ULTRA CMS Post DIMENSIONS45
C E NT E R P OS T
ADJ US T ME NT

50 S Q

ANT130-XY Series

82.6 S Q

AIR F IT T ING F OR
4 [ 5/32"] V AC UUM
LINE (ALT E R NAT E
AT T AC HME NT ME T HOD)

4X
50.8 S Q

6.8 S LOT T HR U ALL
11.0 S LOT
8.0

38.1

C AB LE T IE MOUNT S(B OT H S IDE S )
130.2

38.1

38.1
82.6

44.4
34.9
25.4

11.1 R E F .

11.8
AC P 3: INC LUDE D WIT H"-XY Z-C MS " OP T ION

QT Y (4) MAG NE T S(ALT E R NAT E AT T AC HME NT
ME T HOD)

NOT E : DIME NS IONS NOT S HOWN
AR E T HE S AME AS AC P 2
AC P 2: INC LUDE D WIT H"-XY -C MS " OP T ION

DIME NS IONS : MILLIME T E R S

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8NANO Technology

ANT130-XY Series ORDERING INFORMATION

ANT130-XY Series

ANT130-XY Series Linear Stage
ANT130-XY-BASE
Aerotech nanotranslation crossed-roller linear positioner
ANT130-XY-PLUS
Aerotech nanotranslation crossed-roller linear positioner
ANT130-XY-ULTRA
Aerotech nanotranslation crossed-roller linear positioner
Linear Stage Travel
ANT130-060-XY-BASE
ANT130-110-XY-BASE
ANT130-160-XY-BASE
ANT130-060-XY-PLUS
ANT130-110-XY-PLUS
ANT130-160-XY-PLUS
ANT130-060-XY-ULTRA
ANT130-110-XY-ULTRA
ANT130-160-XY-ULTRA

60 mm travel XY stage with linear motor and limits
110 mm travel XY stage with linear motor and limits
160 mm travel XY stage with linear motor and limits
60 mm travel XY stage with linear motor and limits (high accuracy version)
110 mm travel XY stage with linear motor and limits (high accuracy version)
160 mm travel XY stage with linear motor and limits (high accuracy version)
60 mm travel XY stage with linear motor and limits (high accuracy version)
110 mm travel XY stage with linear motor and limits (high accuracy version)
160 mm travel XY stage with linear motor and limits (high accuracy version)

Output Cable Connectors-25DU-4DU-25DU

Single 25-pin D connector (standard)
4-pin HPD and 25-pin D connectors

Note: -25DU single 25-pin connector option not valid for systems using bus voltages greater than 80 V

9

CMS Post-XY-CMS-XYZ-CMS

Post for two-axis cable anchoring (ACP2 – see product drawing)
Post for three-axis cable anchoring (ACP3 – see product drawing)

Options-MP

Breadboard mounting plate

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