Two-Axis, XY, Piezo Nanopositioning Stages
Travel ranges from 100 μm to 600 μm available

High-precision, frictionless flexure guidancesystemSuperior positioning resolution and linearity to0.007% with direct-metrology capacitive sensor
options
Mounting compatibility with other QNP-seriespiezo nanopositioners
Open-loop and vacuum versions
Aerotech’s QNP-series of piezo nanopositioning stages offers
nanometer-level performance in a compact, high-stiffness
package. A variety of travel (100 µm to 600 µm) and feedback
options make this the ideal solution for applications rangingfrom microscopy to optics alignment.

High Quality in a Compact Package
The QNP piezo stages are guided by precision flexures that are
optimized using finite element analysis to ensure high-stiffness
and long device life. The resulting design offers outstanding
stiffness and resonant frequency enabling high process
throughput and fast closed-loop response. Furthermore, theintegrated XY package minimizes stage stack height andmoving mass, resulting in superior static and dynamic multiaxis performance.
10High-Resolution and Positioning Accuracy
All of the QNP piezo stages have the option of closed-loop
feedback using a unique capacitive sensor design that allows for
sub-nanometer resolution and high linearity. The capacitive
sensors measure the output of the positioning carriage directly,
enabling superior accuracy and repeatability.

Ultra-Precision Control
When coupled with Aerotech’s Q-series of controllers anddrives, the QNP piezo nanopositioning stages demonstrate subnanometer positioning resolution and in-position stability(jitter), and high-positioning bandwidth. Software options suchas Aerotech’s Dynamic Controls Toolbox and Motion Designer
packages provide a host of advanced yet easy-to-use tools suchas Learning Control, Harmonic Cancellation, and Command
Shaping, providing improved tracking errors and faster stepand-settle times.
Automatic parameter and calibration identification isaccomplished using Aerotech’s FlashConfig feature. The stage
is automatically identified and all operational parameters
including axis calibration data are uploaded into the controller
ensuring safe, accurate and true “plug-and-play” operation.

Design Flexibility

8

Aerotech’s QNP piezo stages are available with capacitancesensor feedback or without feedback (open-loop). Open-loopprovides a cost-effective option for applications where compact
size, high-dynamics, and sub-nanometer positioning resolution
are required, but absolute positioning accuracy and repeatability
are not required. Open-loop designs can also be used where thepiezo position is controlled via an external feedback source(interferometer, vision system, photodetector, etc.).

6Linearity Error (nm)Aerotech’s QNP-XY series of
two-axis piezo nanopositioners
offers closed-loop travel optionsof 100, 250, and 500 µm.

QNP-XY SeriesLong device lifetime

Linear Piezo Stages

QNP-XY Series

420−2−4−6−8−10010203040506070
Stage Position (Pm)8090100

QNP-40-100XY upper-axis linearity error plot measured with alaser interferometer over multiple bidirectional runs. The linearity
measured is <0.002%. All sizes of the QNP stage series exhibit
exceptional linearity and repeatability.

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An optional mounting plate provides direct mounting toEnglish or metric breadboard optical tables. The QNP-seriesalso includes the -L and -Z stages in which common travels
mount together with adapter plates.
All QNP piezo stages are available in vacuum-preparedversions upon request.

1

QNP-XY Series

Linear Piezo Stages

QNP-XY SPECIFICATIONS
Mechanical Specifications

QNP-40-100XY

QNP-50-250XY

QNP-60-500XY

Closed-Loop Travel

100 µm

250 µm500 µmOpen-Loop Travel, -30 to +150 V(1)120 µm300 µm

600 µmClosed-Loop

0.30 nm0.50 nm0.90 nm

Open-LoopResolution(2)0.15 nm0.20 nm0.40 nmLinearity(3,4)

0.01%

0.01%

0.007%

Bidirectional Repeatability(5)

2 nm

4 nm

5 nm

Pitch/Yaw

6 µrad (1.2 arc sec)

6 µrad (1.2 arc sec)

12 µrad (2.5 arc sec)

Orthogonality

40 µrad (8 arc sec)

30 µrad (6 arc sec)

30 µrad (6 arc sec)

1.05 N/µm

0.36 N/µm

0.24 N/µm

Top Axis885 Hz445 Hz315 HzBottom Axis

635 Hz295 Hz200 HzTop Axis

495 Hz305 Hz240 HzBottom Axis

335 Hz240 Hz170 HzPush/Pull Capacity (In Direction of Motion)(7)

10 N

10 N

10 N

Max Payload(8)

1 kg

1 kg

1 kg

Stage Mass

0.11 kg

0.17 kg

0.27 kg

Stiffness (In Direction of Motion)(6)Unloaded Resonant Frequency(6)Resonant Frequency (50 gram load)(6)Anodized Aluminum(9)Material

30,000 Hours

MTBF (Mean Time Between Failure)

Notes:
1. Value ±10%.
2. See Piezo Engineering Reference section 4.2 for description of resolution.
3. Certified with each stage (closed-loop feedback models only).
4. Measured approximately 15 mm above the carriage by an external metrology device. See Piezo Engineering Reference section 4.1 for description of linearity specifications.
5. Specified as a 1 sigma (standard deviation) value. See Piezo Engineering Reference section 4.3 for description of bidirectional repeatability.
6. Values ±20%.
7. See Piezo Engineering Reference section 4.6 for description of piezo stage load ratings.
8. On-axis loading listed.
9. External elements are anodized aluminum. Some stainless steel components are used in the internal construction. Other materials upon request.
10. Specifications are measured centered and at a height of approximately 15 mm above the output carriage.

Electrical Specifications

QNP-40-100XY

QNP-50-250XY

QNP-60-500XY

Piezo Multi-Layer Stack Actuator

Drive System

Closed Loop: Integrated Capacitive Sensor (-C)
Open Loop: None (-)

Feedback-30 V to +150 VVoltage Range
Piezo Stack Capacitance(1)1.6 µF

2.3 µF6.4 µFNote:
1. Value ±20%

Recommended Controller
Ensemble

Ensemble QLAB
Ensemble QDe
Ensemble QLeEnsemble QL

A3200

Ndrive QLe
Ndrive QL

Notes:
1. Unless noted, the QLAB, QDe, or QLe drives are required to achieve the listed specifications. Contact Aerotech for specifications when used with the QL drives.

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QNP-XY Series DIMENSIONS
Linear Piezo Stages

CTYP
UPPER AXIS
CABLE EXIT
(1.5 M LENGTH)

LOWER AXIS
CABLE EXIT
(1.5 M LENGTH)

12.5

TYP 3.5

1.52X

3QNP-XY Series

DTYP
CLCL

CUSTOMER MOUNTING
4X M36(THRU ACCESS FOR 2 MM WRENCH)BA

UPPER EXPANSION

0V

LOWER EXPANSION

0.3 TYP

0V

5.4
6.225

CLCTYP

CL

DTYP
4X

4X T-SLOTS FOR M3 X 8 LOW HEAD SHCS (PROVIDED)CONCENTRIC WITH M3 CUSTOMER MOUNTING HOLES

1.53(AXES SHOWN AT MID-TRAVEL)STAGEABC

D

QNP-40-100XY

4030

18.5

15

QNP-50-250XY504023.520

QNP-60-500XY6050

28.525-MP (MOUNTING PLATE, BREADBOARD)
25.4M3EF

251025.4

CL

1/4-20 THRU

6CL25STAGE

E

F

QNP-40-100XY

4030QNP-50-250XY

5040QNP-60-500XY

6050BREADBOARD MOUNTING PATTERN
4X M6 OR 1/4 BOLT C'BORE SLOTDIMENSIONS: MILLIMETERS

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3QNP-XY Series

Linear Piezo Stages

QNP-XY Series ORDERING INFORMATION

4QNP-XY Series Two-Axis Piezo Nanopositioning Stage
QNP-40-100XY
QNP-40-100XY-C
QNP-50-250XY
QNP-50-250XY-C
QNP-60-500XY
QNP-60-500XY-C

QNP-XY series open-loop nanopositioner, 40 mm wide, 120 µm x 120 µm open-loop travel
QNP-XY series closed-loop nanopositioner with capacitive sensor feedback, 40 mm wide, 100 µm x 100 µm
closed-loop travel (120 µm x 120 µm open-loop travel)
QNP-XY series open-loop nanopositioner, 50 mm wide, 300 µm x 300 µm open-loop travel
QNP-XY series closed-loop nanopositioner with capacitive sensor feedback, 50 mm wide, 250 µm x 250 µm
closed-loop travel (300 µm x 300 µm open-loop travel)
QNP-XY series open-loop nanopositioner, 60mm wide, 600 µm x 600 µm open-loop travel
QNP-XY series closed-loop nanopositioner with capacitive sensor feedback, 60 mm wide, 500 µm x 500 µm
closed-loop travel (600 µm x 600 µm open-loop travel)

Mounting Plate (Optional)-MP

Mounting plate for English and metric optical breadboard tables

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