Single-Axis Linear Piezo Nanopositioning Stages
Travel ranges from 100 μm to 600 μm available

High-precision, frictionless flexure guidancesystemSuperior positioning resolution and linearity to0.007% with direct-metrology capacitive sensor
options
Mounting compatibility with other QNP-seriespiezo nanopositioners
Open-loop and vacuum versions
Aerotech’s QNP-series of piezo nanopositioning stages offer
sub-nanometer-level performance in a compact, high-stiffness
package. A variety of travel (100 µm to 600 µm) and feedback
options make this the ideal solution for applications ranging
from microscopy to optics alignment.

High Quality in a Compact Package
The QNP piezo stages are guided by precision flexures that are
optimized using finite element analysis to ensure high-stiffness
and long device life. The resulting design offers outstanding
stiffness and resonant frequency enabling high process
throughput and fast closed-loop response. Furthermore, thesestages have been designed to provide excellent geometricperformance (straightness and angular errors) while at the sametime minimizing the overall stage package size.

Aerotech’s QNP-L series ofsingle-axis piezo nanopositioners
offer closed-loop travel optionsof 100, 250 and 500 µm.

QNP-L SeriesLong device lifetime

Linear Piezo Stages

QNP-L Series

High-resolution and Positioning Accuracy
All of the QNP piezo stages have the option of closed-loop
feedback using a unique capacitive sensor design that allows for
sub-nanometer resolution and high linearity. The capacitive
sensors measure the output of the positioning carriage directly
enabling superior accuracy and repeatability.

Ultra-Precision Control
When coupled with Aerotech’s Q-series of controllers anddrives, the QNP piezo nanopositioning stages demonstrate subnanometer positioning resolution and in-position stability(jitter), and high-positioning bandwidth. Software options suchas Aerotech’s Dynamic Controls Toolbox and Motion Designer
packages provide a host of advanced yet easy-to-use tools suchas Learning Control, Harmonic Cancellation and Command
Shaping, providing improved tracking errors and faster stepand-settle times.
Automatic parameter and calibration identification isaccomplished using Aerotech’s FlashConfig feature. The stage
is automatically identified and all operational parameters
including axis calibration data are uploaded into the controller
ensuring safe, accurate and true “plug-and-play” operation.

Design Flexibility
Aerotech’s QNP piezo stages are available with capacitancesensor feedback or without feedback (open-loop). Open-loop
provides a cost-effective option for applications where compact
size, high-dynamics and sub-nanometer positioning resolution
are required, but absolute positioning accuracy and repeatability
are not required. Open-loop designs can also be used where thepiezo position is controlled via an external feedback source(interferometer, vision system, photodetector, etc.).

QNP-40-100L 0.5 nm bidirectional step plot measured with an external ultra-precision capacitance sensor. All sizes of the QNP-Lstage series offer exceptional sub-nm mechanical step capability.

www.aerotech.com

An optional mounting plate provides direct mounting toEnglish or metric breadboard optical tables. The QNP-seriesalso includes XY and Z stages in which common travels mount
together with adapter plates.
All QNP piezo stages are available in vacuum-preparedversions upon request.

1

Linear Piezo Stages

QNP-L SPECIFICATIONS
Mechanical SpecificationsQNP-40-100L

QNP-50-250L

QNP-60-500L

Closed-Loop Travel

100 µm

250 µm500 µmOpen-Loop Travel, -30 to +150 V(1)120 µm300 µm

600 µm0.30 nm0.50 nm0.90 nm0.15 nm0.01%

0.20 nm0.01%

0.40 nm0.007%

Closed-Loop(Integrated Feedback)Resolution(2)Open-Loop

QNP-L Series

Linearity(3)(4)
Bidirectional Repeatability(5)

1 nm

1 nm

3 nm

6 µrad (1.2 arc sec)

6 µrad (1.2 arc sec)

12 µrad (2.5 arc sec)

Stiffness (In Direction of Motion)(6)1.25 N/µm

0.40 N/µm

0.27 N/µm

Unloaded Resonant Frequency(6)1300 Hz

475 Hz350 HzResonant Frequency (50 Gram Load)(6)650 Hz325 Hz260 HzPitch/Yaw

Push/Pull Capacity (In Direction of Motion)(7)10 N

Max Payload(8)1 kg
0.06 kgStage Mass

0.09 kg

0.14 kg

Anodized Aluminum(9)Material

30,000 Hours

MTBF (Mean Time Between Failure)

Notes:
1. Value ±10%.
2. See Piezo Engineering Reference section 4.2 for description of resolution.
3. Certified with each stage (closed-loop feedback models only).
4. See Piezo Engineering Reference section 4.1 for description of linearity specifications.
5. Specified as a 1 sigma (standard deviation) value. See Piezo Engineering Reference section 4.3 for description of bidirectional repeatability.
6. Values ±20%.
7. See Piezo Engineering Reference section 4.6 for description of piezo stage load ratings.
8. On-axis loading listed.
9. External elements are anodized aluminum. Some internal components are stainless steel. Other materials upon request.
10. Specifications are measured centered and at a height of approximately 15 mm above the output carriage.

Electrical Specifications

QNP-40-100L

QNP-50-250L

QNP-60-500L

Piezo Multi-Layer Stack Actuator

Drive System

Closed Loop: Integrated Capacitive Sensor (-C)
Open Loop: None (-)

Feedback-30 V to +150 V

Voltage Range
Piezo Stack Capacitance(1)

1.6 µF

2.3 µF6.4 µF

Notes:
1. Value ±20%.

Recommended Controller
Ensemble

Ensemble QLAB
Ensemble QDe
Ensemble QLeEnsemble QL

A3200

Ndrive QLe
Ndrive QL

Notes:
1. Unless noted, the QLAB, QDe, or QLe drives are required to achieve the listed specifications. Contact Aerotech for specifications when used with the QL drives.

2www.aerotech.com

QNP-L Series DIMENSIONS
Linear Piezo Stages

E
6.2
CABLE EXIT
(1.5 M LENGTH)

2X

1.533.54X H

QNP-L Series

CLJ

DCL4X

3.5 THRU ALL
63.5CBA

EXPANSION
F

0.50V
G
5.4

1.54X

1537.3CLCL

KL(STAGE SHOWN AT MID-TRAVEL)
STAGE

A

B

C

DE

F

G

H

JK

L

QNP-40-100L

4030

25

1419

29.5

17.6

M243730

QNP-50-250L

50

4030182341.8

24.3

M2.554740

QNP-60-500L

60

504030335135

M2.555750-MP (MOUNTING PLATE, BREADBOARD)
25.4MN25CLM361025.4

STAGEMN

QNP-40-100L

4030

QNP-50-250L

5040

QNP-60-500L

6050

CL
1/4-20 THRU

25BREADBOARD MOUNTING PATTERN
4X M6 OR 1/4 BOLT C'BORE SLOTDIMENSIONS: MILLIMETERS

www.aerotech.com

3

-AP (ADAPTER PLATE)
34X M3X0.5
QNP-40-100L

25

QNP-L Series

Linear Piezo Stages

QNP-L Series Adapter Plate DIMENSIONS

4061430

4X M2 SHCS
4.43.563
4X M3X0.5
QNP-50-250L

30

4X M3X0.54.5
QNP-40-100L

50401830

4X M2.5 SHCS
546404X M3X0.53QNP-60-500L
8X
M3X0.5
QNP-40-100L
QNP-50-250L

60504.53040

4X M2.5 SHCS
5430
DIMENSIONS: MILLIMETERS

4www.aerotech.com

QNP-L Series ORDERING INFORMATION
QNP-40-100L
QNP-40-100L-C
QNP-50-250L
QNP-50-250L-C

Options-MP-AP

Mounting plate for English and metric optical breadboard tables
Adapter plate kit for customer mounting of multi-axis QNP stages; AP-QNP-40-100 mounts 100L upper-axis to100L lower-axis; AP-QNP-50-250 mounts 100L/250L upper-axis to 250L lower-axis; AP-QNP-60-500 mounts
100L/250L/500L upper-axis to 500L lower-axis

QNP-L Series

QNP-60-500L
QNP-60-500L-C

QNP-L series open-loop nanopositioner, 40 mm wide, 120 µm open-loop travel
QNP-L series closed-loop nanopositioner with capacitive sensor feedback, 40 mm wide, 100 µm closed-loop
travel (120 µm open-loop travel)
QNP-L series open-loop nanopositioner, 50 mm wide and 300 µm open-loop travel
QNP-L series closed-loop nanopositioner with capacitive sensor feedback, 50 mm wide, 250 µm closed-looptravel (300 µm open-loop travel)
QNP-L series open-loop nanopositioner, 60 mm wide, 600 µm open-loop travel
QNP-L series closed-loop nanopositioner with capacitive sensor feedback, 60 mm wide, 500 µm closed-looptravel (600 µm open-loop travel)

Linear Piezo Stages

QNP-L Series Single-Axis Piezo Nanopositioning StageA QNP-50-250L
and QNP-40-100L
in an XY
arrangement using
the AP-QNP-50-250
adapter plate.
Two QNP-40-100Lstages in an XY
arrangement using
the AP-QNP-40-100
adapter plate.

www.aerotech.com

5