Edge ® CDG045D2
Heated Capacitance Diaphragm Gauge
INFICON Edge Capacitance Diaphragm Gauge is ahighly accurate vacuum measurement instrument
designed for harsh manufacturing environments. The
proven temperature controlled, corrosion resistant,ultra-pure ceramic sensor provides superior spanstability over many years paired with state-of-the-art
zero stability. Edge comes with the INFICON patented
unique sensor shield, which protects the gauge fromundesired process by-products. Advanced electronics
offer a wide range of configurable signal conditioning
for all applications and optional EtherCAT® fieldbus
interface. The innovative heating concept enables acool to the touch surface and saves valuable toolspace.
INFICON Edge is the smallest vacuum measurement
instrument of its kind.

ADVANTAGES• Compact, saves valuable tool space• Easy integration, EtherCAT, wide variety of full scales and flanges, standard with two set points• Easy one push button or remote signal zero command, zero offset adjustable• Diagnostic port for quick service and maintenance• Two year warranty, longer life time with advanced heating concept and gauge protection.
• No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications• Compliance and standards: CE, EN, UL, SEMI, RoHSAPPLICATIONS• CVD, Etch, PVD and other semiconductor production processes

1Edge® CDG045D2

Edge ® CDG045D2
ORDERING INFORMATION

3 CC 5 – 9 5 1 – 2 3 0 0
Full Scale (FS)125102050
100200500(Torr only) 1000(mbar only) 1100Unit(× 1.33 mbar; × 133 Pa) Torr
(× 100 Pa) mbar1)
2)

Other flange types on request.

256Optimized signal filter setting for pressure control
Not possible with fieldbus interfaces

bold = standard products

Edge® CDG045D20B

6789ABCDEFGStandardP control 1)

Fieldbus interface
0G

None
EtherCATConnector
230115-pin D-Sub, 2 SP
9-pin D-Sub 2)

Flange1
39C
DE

DN 16 ISO-KF
DN 16 CF-R
OD 1/2 in. tube
4 VCR male
4 VCR female
8 VCR female

Edge ® CDG045D2
SPECIFICATIONS
Full scale (FS)Torr / mbar

1000 / 1100 ... 200

Accuracy1)
Temperature effect

0.2 % of reading

On zeroOn spanPressure, max. (absolute)
Response time2)
Resolution
Lowest reading
Lowest suggested

0.0025 % FS / °C
0.02 % of reading / °C
400 kPa

260kPa30 ms
0.003 % FS
0.01 % FS

Reading

0.05 % FS

Control pressure
Temperature

0.5 % FS

Operation (ambient)+10 … +40 °C

Bakeout at flange≤110 °C

Storage
Supply voltage
Power consumption–20 ... +65 °C+14 ... +30 V (dc) or ±15 V (±5%)

During Heat up≤12 W

At operating
temperature
Output signal (analog)
Degree of protection
Standards≤8 W
0 ... +10 V (dc)
IP 40

CE conformity

EMC (EN 61000-6-2, EN 61000-6-3), EN 61010-1 and RoHSETL certification

UL 61010-1, CSA 22.2 No. 61010-1

SEMI complianceElectrical connection
Setpoint

SEMI S2
D-sub, 15-pin, male

Number of setpoints

2 (SP1, SP2)

Relay contact≤30 V (dc)/ ≤0.5 A (dc)

Hysteresis
Diagnostic port

1 % FS

ProtocolRS232-C

ReadSetMaterials exposed tovacuum
Internal volumeWeight3

100 ... 1pressure, status, ID
setpoints, filter, zero adjust, factory reset, DC offset
ceramics (Al2O3), stainless steel (AISI 316L)≤6.8 cm3
540 … 610 g1)

Non-linearity, hysteresis, repeatability at 25°C ambient operating temperature without temperature effects after two hours operation2)

Increase 10 ... 90% FS

Edge® CDG045D2

Edge ® CDG045D2
DIMENSIONS

www.inficon.com

reachus@inficon.com

Due to our continuing program of product improvements, specifications are subject to change without notice.
The trademarks mentioned in this document are held by the companies that produce them.
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