Edge® CDG025D2,CDG045D2, CDG100D2High precision Vacuum Gauge
Hot Inside. Small Outside.

Edge®
High precision vacuum gauge
INFICON Edge® Capacitance Diaphragm
Gauge is a highly accurate vacuum
measurement instrument designed forharsh manufacturing environments. The
proven temperature controlled, corrosion
resistant, ultra-pure ceramic sensor
provides superior span stability overmany years paired with state-of-the-art
zero stability. Edge comes with theINFICON patented unique sensor shieldwhich protects the gauge from undesired
process by-products.

ADVANTAGES AT A GLANCE
 Low tool space required – Smallest instrument in class Flexible integration – EtherCAT® fieldbus
 Long lifetime – Proven ceramic sensor
 Forget recalibration – 90ppm/year full scale stability

TYPICAL APPLICATIONS CVD, Etch, PVD, ALD
 Analytical applications
 General high temperature
vacuum applications

Advanced electronics offer a wide range ofconfigurable signal conditioning for all
applications and optional EtherCAT ®
fieldbus interface.
The innovative heating concept enables acool to the touch surface and saves valuable tool space. INFICON Edge® is thesmallest vacuum measurement instrumentof its kind.

Measurement ranges

Space-saving design

Full Scale (Torr)

11063 mm
82 mm

10010000.0001 0.001 0.010.1110						100

1000 Pressure(Torr)

Air insulation

Fully ceramic sensor

Edge®
High precision vacuum gauge

Bonded ceramic structure combined withdigital signal processing provides superior
measurement performance.

CDG working principle

Outstanding stability

Error (FS)PTB CheckStd
Ceramic CDG 1
Ceramic CDG 2
Ceramic CDG 3
Ceramic CDG 40.40

 Temperature controlled
at ± 0.1°C0.30

 Fast warm up

0.20

 Insulated to changing 		

0.10

ambient

Direct pressure measurement
by diaphragmpΔd ~ pΔCpCapacitance readout

Δd1 ~pΔCp0p

ElectrodeDiaphragmp = pressure-0.10

INFICON Edge® Capacitance Diaphragm
Gauge is a highly accurate vacuum
measurement instrument designed forharsh manufacturing environments. The
proven temperature controlled, corrosion
resistant, ultra-pure ceramic sensor
provides superior span stability overmany years paired with state-of-the-art
zero stability. Edge comes with theINFICON patented unique sensor shieldwhich protects the gauge from undesired
process by-products.

-0.20
012345678910time(years)TYPICAL APPLICATIONS CVD, Etch, PVD, ALD

Interface I / O

 Analytical applications

 Analog signal 0 … 10V

 General high temperature
vacuum applications

 Wide range power supply Zero adjust, push button / remote DI 2 individual setpoints
 Status LED
 Diagnostic port
 Fieldbus: EtherCAT

 Flexible integration – EtherCAT® fieldbus
 Long lifetime – Proven ceramic sensor
 Forget recalibration – 90ppm/year full scale stability

Span stability
Any mounting orientation

Rendering

The innovative heating concept enables acool to the touch surface and saves valuable tool space. INFICON Edge® is thesmallest vacuum measurement instrumentof its kind.

EtherCAT

Analogmodern integration, flexible real time

Gas type independence

Digital signal processing

CDG sensor technology
Other typical sensor technologies
He(mbar) Low tool space required – Smallest instrument in class

Advanced electronics offer a wide range ofconfigurable signal conditioning for all
applications and optional EtherCAT ®
fieldbus interface.

dynamicNe+Air

slow

fast

Gauge protection for increased lifetime

Indicated pressure

ADVANTAGES AT A GLANCE

Level 1		BaffleStops coating, particles

Level 2		HeaterPrevents condensation / deposition

Level 3		ShieldProtects diaphragm

Level 4		Protective coating
Corrosion protection

°C
10045

True pressure(mbar)

5Temperature ramp / stability

Digital filters

Air insulatedarchitecture
assures an excellent
temperature stability.

Temperature
coefficient / accuracy

Uout = a • p + b (a = slope / b = off-set)
Ugain

Setable output

offsetstandardPExcellent Customer Support is a Commitment

INFICON provides a global network of sales and service
centers. These centers are staffed with local service andapplication experts who can assist you in choosing the bestsolution for your individual product application and provide
fast support if service is needed.

Korea
INFICON Ltd.
Gyoenggi-do
Phone : +82 31 783 2942
E-mail : reach.korea@inficon.com

Americas

Asia and PacificUnited States
INFICON Inc.
East Syracuse, NY
Phone : +1 315 434 1100
E-mail : reach.us@inficon.com

China
INFICON Ltd.
Beijing
Phone : +86 10 6590 0164
E-mail : reach.china@inficon.com

Singapore, South Asia andAustralia / New Zealand
INFICON PTE Ltd.
Singapore
Phone : +65 6631 0300
E-mail : reach.singapore@inficon.com

Japan
INFICON Co. Ltd.
Kawasaki-shi, Kanagawa-ken
Phone : +81 44 822 1111
E-mail : reach.japan@inficon.com

Taiwan
INFICON Co. Ltd.
Chupei City
Phone : +886 3 552 5828
E-mail : reach.taiwan@inficon.co

MexicoINFICON Mexico
Santiago de Querétaro, Qro.
Phone : +52 (442) 980 00 80
E-mail : reach.mexico@inficon.com

w w w . infico n.co mEurope, Middle Eastand Africa
INFICON GmbHCologne
Phone : +49 221 567 881 00
E-mail : reach.germany@inficon.com

reachu s @in f icon . com

Due to our continuing program of product improvements, specifications are subject to change without notice.
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