SKY ® CDG045D
Heated Capacitance Diaphragm Gauge
INFICON SKY CDG045D manometers are your best
choice for highly accurate total pressure measurement
and control. CDG045D gauges are temperature
controlled at 45°C for superior signal stability andrepeatability. They are available for full scale ranges
from 50 mTorr to 1000 Torr, with all common flangetypes and fieldbus interfaces and provide a linear 0 to
10 V, gas type independent, pressure signal. INFICON
capacitance manometers use a corrosion proof ultra
pure alumina ceramic diaphragm. The advantages ofthe ceramic sensor are better signal stability, fasterrecovery from atmosphere, short warm up time and an
extraordinary lifetime. INFICON CDG are high quality,
cost effective pressure sensors for demanding vacuum
applications.

ADVANTAGES• Lower cost of ownership, 50% faster warm up, energy efficient low power consumption• Easy integration, wide variety of full scales, flanges and interfaces, standard with two set points• Easy one push button or remote signal zero command, zero offset adjustable• Diagnostic port for quick service and maintenance• Two year warranty, longer lifetime with advanced heating concept and gauge protection• No long term recalibration due to excellent signal stability and repeatability, even in harsh plasma applications• Compliance and standards: CE, EN, UL, SEMI, RoHSAPPLICATIONS• Etch, CVD, PVD and other semiconductor production processes• Chemical and corrosive vacuum processes• General thin film and vacuum processes• Reference sensor for monitoring of test instruments according to international standards• Transfer standard for traceability measurements

1SKY® CDG045D

SKY ® CDG045D
ORDERING INFORMATION

3 CC 1 – 6 5 1 – 2 3 0 0
Full Scale (FS)
0.05
0.1
0.25
0.5125102050
100200500(Torr only) 1000(mbar only) 1100

0B

23456789ABCDEFG

Fieldbus interface
012AEG1)
2)

2301

13
9
C
DEH

56

DN 16 ISO-KF
DN 16 CF-R
OD 1/2 in. tube
4 VCR male
4 VCR female
8 VCR female
8 VCR female long

Optimized signal filter setting for pressure control
Not possible with fieldbus interfaces

bold = standard products
Other flange types on request.

ACCESSORIESType1)

2

Diagnostic SW available upon request

SKY® CDG045D

15-pin D-Sub, 2SP
9-pin D-Sub 2)

FlangeDiagnostic cable RS232C; USB-A - phone jack 2.5mm (1.8m)

None
DeviceNet TM
Profibus DP TM
Profinet TM
4...20mA current loop
EtherCATConnector

Unit(× 1.33 mbar; × 133 Pa) Torr
(× 100 Pa) mbar

Standard
P control 1)

Part no.
1)

303-366

SKY ® CDG045D
SPECIFICATIONS
Full scale (FS)Torr / mbar

1000 / 1100 ... 200

100 ... 1

Accuracy 1)
Temperature effecton zeroon span
Pressure, max. (absolute)
Response time 2)
Resolution
Lowest reading
Lowest suggested

0.5 ... 0.25

0.15 % of reading
0.0025 % FS / °C

0.005 % FS / °C

0.01 % of reading / °C
400 kPa
260 kPa
30 ms

0.01 % of reading / °C
130 kPa
130 / 303) ms
0.003 % FS
0.01 % FS

Reading

0.05 % FS

Control pressure
Temperature

0.5 % FS

Operation (ambient)+10 … +40 °C

Bakeout at flange≤110 °C

Storage
Supply voltage

0.1 ... 0.05

–20 … +65 °C+14 … +30 V (dc) or±15 V (±5%)

Power consumption
During Heat up≤12 W

At operating
temperature
Output signal (analog)
Degree of protection
Standards≤8 W

CE conformity

EN 61000-6-2/-6-3, EN 61010 & RoHSETL certification

UL 61010-1, CSA 22.2 No.61010-1

SEMI complianceElectrical connection
Setpoint

SEMI S2
D-sub, 15-pin, male

Number of setpoints

2 (SP1,SP2)

Relay contact≤30 V (dc) / ≤0.5 A (dc)

Hysteresis
Diagnostic port

1 % FS

ProtocolReadSetMaterials exposed tovacuum
Internal volume
Weight30 … +10 V (dc)
IP 40

RS232-Cpressure, status, ID
set points, filter, zero, adjust, factory reset, DC offset
ceramics (AI2O3), stainless steel (AISI 316L)≤6.8 cm
870 … 942 g1)

Non-linearity, hysteresis, repeatability at 25°C ambient operating temperature without temperature effects after two hours operation for≥ 1 Torr and after 4 hours operation for < 1 Torr

2)

Increase 10 ... 90% FS

3)For pressure control type onlySKY® CDG045D

SKY ® CDG045D
SPECIFICATIONS INTERFACES
DeviceNet™
ProtocolData rate switch
Cable length

DeviceNet™, group 2 slave only
125, 250, 500 kBaud or network programmable

125 kbps

500 m (1650 ft.)

250 kbps

250 m (825 ft.)

500 kbps
MAC ID
Digital functions

100 m (330 ft.)
Two switches (address 00 – 63) or network programmable
Read pressure, select units: Torr, mbar, Pa
Set points, filter, zero adjust, factory reset, DC offset
Monitor gauge status
Safe state allows definition of behavior in case of error

Analog functions

Detailed alarm and warning information
0 … 10 V analog output pressure indication

Visual communication indicators

two setpoint relays A + B
LED network status (green / red)Specification
Device typeI / O slave messaging
Supply voltage for DeviceNet™

LED module status (green / red)
DeviceNet™ “Vacuum Gauge Device Profile”“VG” for combination gauge
Polling only
24 V nominal (11 ... 25 V)

Supply voltage for gauge
Connector for DeviceNet™
Connector for Gauges (analog output,supply voltage, setpoints)+14 ... +30 V (dc) or ±15 V (±5%)
Microstyle, 5-pin
D-Sub, 15-pin, male

PROFIBUS DP
Baud rates
Address
Digital functions

9.6 / 19.2 / 93.75 / 187.5 / 500 kBaude
1.5 / 12 MBaud
Two switches (address 00 - 125) or network programmable
Read pressure, select units: Torr, mbar, Pa
Set points, filter, zero adjust, factory reset, DC offset
Monitor gauge status, filament status
Safe state allows definition of behavior in case of error

Analog functions
Connector for Profibus DP
Connector for CDG (analog output,supply voltage, setpoints)

4SKY® CDG045D

Detailed alarm and warning information
0 … 10 V analog output pressure indication
two setpoint relays A + B
D-Sub, 9-pin, female
D-Sub, 15-pin, maleSKY ® CDG045D
PROFINET™
Communication protocol
Physical Layer
Digital functions
readsetProfinet connector
Cable
Cable length
Data rate

protocol specialized for PROFINET
100BASE-Tx (IEEE 802.3)
pressure, status, ID
set points, filter, zero adjust, reset, DC offset
2 × RJ45, 8-pin (socket), IN and OUT
Special Ethernet Patch Cable or Crossover Cable, shielded (CAT5e quality orhigher)≤100 m (330 ft.)
100000 Kbps

4-20mA current loop (analog)
Output signal (measurement signal)
Signal range
Measuring rang (zero ... FS)
Loaded impedance RL

2-wire, current loop
3.8 ... 20.2 mA
4.0 ... 20.0 mA
18.5 ... 33.3 V (dc) 1) 500 Ω
16.2 ... 31.0 V (dc) 1) 400 Ω
13.9 ... 28.8 V (dc) 1) 300 Ω
11.7 ... 26.5 V (dc) 1) 200 Ω
9.4 ... 24.2 V (dc) 1) 100 Ω1)

5

Supply voltage current interfaceSKY® CDG045D

SKY ® CDG045D
DIMENSIONS

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reachus@inficon.com

Due to our continuing program of product improvements, specifications are subject to change without notice.
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