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Price

MMS IR PbS*

Straylight/ OpticalNoise
resolution< 20 nm(0,91-2,2 µm)

MMS IR InGaAs*< 20 nm(0,6-2,1 µm)

MCS 551 NIR

2.5 nm(0,7-1,1 µm)

MCS 551 VIS

2.5 nm(0,36-0,78 µm)

MCS 501 UVNIR

2.5 nm(0,19-1,015 µm)MCS 551 UV

2.5 nm(0,20-0,62 µm)

MMS 1< 10 nm(0,30-1,1 µm)

MMS UV-VIS
0,20,40,60,81,01,21,41,61,82,02,2 λ (µm)

< 7 nm(0,19-0,74 µm)

MMS UV(0,19-0,4 µm)< 3 nmSensitivity

Spectral Sensors

Spectral range
MMS 1

MMS UVMMS UV VIS

Accuracy

0.3 nm305...1150 nm
specification for therange360---900 nm
0.2 nm200...400 nm
specification for therange
220---400
0.2 nm305...1150 nm
specification for therange360---900 nm

Resolution
10 nm

3 nm

7 nm

Spectral Sensors

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Spectral Sensors

Measuring method

Transmission

Interference spectrum evaluation

Background

Spectral dependence ofabsorption constantEvaluation of phase differencesin the light reflected by opticallytransparent layers

Demands on sensor

High speed
High wavelength reproducibility

High wavelength accuracy
High wavelength reproducibility

Suitable CZ sensors

All MMS/MCS

MMS VIS for optical layer thickness
measurement <40 µm
MCS VIS/NIR <150 µm

Concentration analyses of fluids
Filter measurement
Measurement ofarchitectural glass

Layer thickness measurement ontransparent materials such as
coating films, plastics, films

Fields of application

Spectral Sensors
Measuring method

Emission

Remission

Reflection

Background

Spectral emission oflight sources

Diffuse reflection

Directly reflected light

Demands on sensor

High wavelength
accuracyHigh wavelength
reproducibility
Good spectral
resolving power
High light sensitivity

High light sensitivity
High reproducibility

High wavelength accuracy

Suitable CZ sensors

All MMS/MCS
Limited spectral
resolution in case of veryclosely spaced lines

MMS VISMCS UV-VISMCS VISAll MMS/MCS

Fields of application
Monitoring of plasms
Colour measurement
Measuring the solar
on different surfaces
spectrum
Fluorescence
Production screening of lamps
Wavelength determination of LEDs

Measurement of metal
surfacesSpectral Sensors

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Concentration
Absorption AColourRemission R

LayerThickness
Reflection, Transmission

Flow through cell
ATRImmersion probe

OFT 0°/d
OFR d/0°
OMK 0°/45°
Colour Immersion probe

Standard optics
Y-fibre bundle
OFT

SimultaneousSpectrometer MCS 500

Dissolution testing
Sewage monitoring
Benzene synthesis

Printing machines
Textil colours
Architecture glass

IC production
Copier drums
Headlight coating

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I out: emitted intensity
e (λ): spectral extinction module
E: extinction (absorbance)

calibration curve: c = f(E)for single component analysis
at a single wavelengthorfor multicomponent analysis
using Partial Least Squares

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Method for Layer Thickness Measurement X-ray Fluorescence Method
X-ray tube
Counter tube

X-raysNon-contact layer thickness measurement

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Measuring range
The measuring range depends on thematerial and the software.
Single layers approx. 0.1 - 100 µm
Double layers <25 µm per layerRemarks• Multi-layer systems can be analyzed• State-of-the-art measuring method,but still relatively expensive• At present, few on-line applications possible

Spectral Sensors
Methods for Layer Thickness Measurement - Beta Reflection Method
Counter tube

Reflected beta
particle

Isotopic source
Annular diaphragm
Layer thickness dSubstrate

Non-contact thickness measurement of layers whose atomic number differs substantiallyfrom the substrate material.

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possible• Relatively insensitive to vibrations• No hazardous or harmful radiation• Simple installation for on-line use

Spectral Sensors

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wavelength.I rel (l)3. Normalized spectralfunction x (l),y (l), z (l)that define the standard colour sensitive humaneye

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Principle:
Laser:
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Switching Frequency:
Measuring Length:

Application:differential absorption spectroscopy
1W CO2 -Laser;10,80 µm/ 10,78 µm<1 ppm
1 KHz
1 - 20 m

Waste incineration plants
Power plants