2007A1904BL20XUᐔ᧼⁁᭴ㅧࠍ᦭ߔࠆࠛ࡟ࠢ࠻ࡠ࠾ࠢࠬታⵝၮ᧼ߩࡑࠗࠢࡠធวㇱߦ߅ߌࠆ X ✢ਇቢో CT ߦࠃࠆ↹⾰ะ਄ߩ⎇ⓥ
Quality improvement on X-ray micro-CT images obtained by incomplete
projection data of microjoints on electronic packaging with planer structureጟᧄ૫ਯ*1㧘㜞ᩉ Პ*1㧘㊒⼱ᶈਯ*2㧘૒ጊ೑ᒾ*2㧘਄᧖ஜᄥᦶ*3㧘᫪ቁ↵*4Yoshiyuki Okamoto*1, Takeshi Takayanagi*1, Hiroyuki Tsuritani*2, Toshihiko Sayama*2,Kentaro Uesugi*3, Takao Mori*4*1ࠦ࡯࠮࡞ᩣᑼળ␠, *2 ንጊ⋵Ꮏᬺᛛⴚ࠮ࡦ࠲࡯, *3 㜞ノᐲశ⑼ቇ⎇ⓥ࠮ࡦ࠲࡯, *4 ንጊ⋵┙ᄢቇ*1Cosel Co., Ltd., *2Toyama Industrial Technology Center, *3SPring-8/JASRI,*4Toyama Prefectural University

1. ߪߓ߼ߦࠆታⵝၮ᧼ߦ߅ߌࠆࡑࠗࠢࡠធวㇱߩቢోߥ㕖㔚ሶၮ᧼ߩࡑࠗࠢࡠធวㇱߦ߅޿ߡߪ‫∋ޔ‬ഭ⎕უᬌᩏߢ޽ࠆ‫ޕ‬៊்߇‫ޔ‬㔚ሶၮ᧼ߩା㗬ᕈߦᄢ߈ߥᓇ㗀ࠍਈ߃ߘߎߢ‫⎇ᧄޔ‬ⓥߢߪ‫ޔ‬㔚ሶၮ᧼ߩᒻ⁁⊛ߥ․ࠆ࿃ሶߢ޽ࠆ‫ޔߡߞ߇ߚߒޕ‬㔚ሶᯏེߩା㗬ᕈᓽ㧔㕙Ⓧߪᐢ޿߇⭯޿㧕ࠍ⠨ᘦߒ‫ޔ‬ਇቢోߥㅘะ਄߅ࠃ߮ታⵝߩ㜞ᐲൻߦࠃࠆᣂߒ޿㔚ሶᯏེㆊ↹௝࠺࡯࠲߆ࠄ CT ↹௝ࠍౣ᭴ᚑߔࠆߚ߼ߦ‫ޔ‬ߩ㐿⊒ߩߚ߼‫ޔ‬ᓸ⚦ߥᰳ㒱߿៊்ࠍ㕖⎕უߢᬌᛩᓇᣇᴺ߿ౣ᭴ᚑᣇᴺࠍᬌ⸛ߒߚ‫ޔߜࠊߥߔޕ‬಴‫⹏ޔ‬ଔߔࠆᛛⴚࠍ㐿⊒ߔࠆߎߣ߇‫࠻ࠢ࡟ࠛޔ‬㔚ሶၮ᧼ࠍടᎿߔࠆߎߣߥߊ‫ޔ‬SP-PCT ࠍ↪޿ߡࡠ࠾ࠢࠬ㑐ㅪ↥ᬺߦ߅޿ߡߪᕆോߣߥߞߡ޿ࠆ‫ޕ‬ቢోߥ㕖⎕უߢⷰኤߒ‫ޔ‬ታ↪ߦ⠴߃߁ࠆࠃ߁ CTߎࠇ߹ߢ‫ޔ‬ᚒ‫⎇ߩޘ‬ⓥࠣ࡞࡯ࡊߢߪ‫ޔ‬LSI㧔Large↹௝ߩ↹⾰ะ਄ࠍ࿑ߞߚ‫ޕ‬

Scale Integrated circuit㧕߇ࡈ࡝࠶ࡊ࠴࠶ࡊ㧔FC‫ޔ‬
Flip Chip㧕ታⵝߐࠇߚ㔚ሶၮ᧼ࠍኻ⽎ߣߒ‫ߩߘޔ‬

2. X ✢ࡑࠗࠢࡠ CT ⵝ⟎ߩ᭴ᚑߣ․ᓽ

ࡑࠗࠢࡠߪࠎߛធวㇱߩᾲ∋ഭߦࠃࠆ៊்㧔ᓸ SP-PCT ߢߪ‫ߩࠄ߆࠲࡯࡟ࡘࠫࡦࠕޔ‬᡼኿శࠍ‫ޔ‬⚦⚵❱ߩᄌൻ߿∋ഭ߈ⵚ㧕ࠍ‫ޔ‬᡼኿శࠍశḮߣSi ߩੑ⚿᥏ಽశེߦࠃࠅන⦡ൻߒߚ X ✢ࠍ⹜ᢱߔࠆ X ✢ࡑࠗࠢࡠ CT ⵝ⟎㧔એਅ‫ޔ‬SP-PCT㧕 ߦᾖ኿ߔࠆ‫ ߩߎޕ‬X ✢ߪ‫ޔ‬ᡆૃ⊛ߦᐔⴕశߣ⷗ࠍ↪޿ߡ⹏ଔߔࠆ⎇ⓥࠍⴕ޿‫⹏ޔ‬ଔᛛⴚߩታ↪

ߥߖࠆ߶ߤ㜞޿ᜰะᕈࠍ᦭ߒߡ߅ࠅ‫ޔ‬㜞ಽ⸃⢻น⢻ᕈࠍ㜞߼ߡ߈ߚ  ‫ޔߒ߆ߒޕ‬ቢోߥㅘㆊ↹ߩ 3 ᰴర↹௝ࠍౣ᭴ᚑߔࠆߎߣ߇น⢻ߢ޽ࠆ‫ޕ‬௝࠺࡯࠲߆ࠄ CT ↹௝ࠍౣ᭴ᚑߔࠆߚ߼ߦߪ‫ޔ‬ᬌ߹ߚ‫ޔ‬න⦡శൻߦࠃࠅ‫ ߩߘޔ‬X ✢ࠛࡀ࡞ࠡߦኻᩏኻ⽎ߩᄢ߈ߐ߿ᒻ⁁ߦ೙⚂߇޽ࠅ‫ޔ‬න৻ߩធߔࠆ X ✢✢ๆ෼ଥᢙ㧔LAC, Linear Attenuationว૕߿㔚ሶၮ᧼ߩ৻ㇱࠍಾᢿߒߚ⹜㛎૕ࠍⷰኤ

Coefficient㧕ߩ 3 ᰴరಽᏓࠍቯ㊂⊛ߦ⹏ଔߔࠆߎ

ߖߑࠆࠍᓧߥ߆ߞߚ‫৻ޕ‬ᣇ‫ࠬࠢ࠾ࡠ࠻ࠢ࡟ࠛޔ‬ߣ߇น⢻ߢ޽ࠆ‫ ߩߎޔߦࠄߐޕ‬X ✢ߩࠦࡅ࡯࡟㑐ㅪ↥ᬺߦ߅ߌࠆ࠾࡯࠭ߪ‫ޔ‬ᐔ᧼⁁᭴ㅧࠍ᦭ߔ

ࡦ࠻ߥ․ᕈࠍ೑↪ߒ‫࡞ࡀ࡟ࡈޔ‬࿁᛬ߦࠃߞߡࠛ࠶ࠫࠍᒝ⺞⴫␜ߐߖࠆߎߣ߽น⢻ߢ޽ࠆ‫ޕ‬

4. ਇቢో CT ߦࠃߞߡᓧࠄࠇࠆ↹௝ߩ↹⾰ะ਄ SP-PCT ᧄ૕ߪ‫♖ޔ‬ኒ࿁ォࠬ࠹࡯ࠫ‫ ߮ࠃ߅ޔ‬XFig.㧝ߪ‫ޔ‬ౣ᭴ᚑߒߚ޿ߊߟ߆ߩ CT ↹௝ߩ଀✢ᬌ಴ⵝ⟎ߦࠃߞߡ᭴ᚑߐࠇࠆ‫ޕ‬X ✢ᬌ಴ⵝ⟎ࠍ␜ߔ‫↹ޕ‬௝ a ߪ‫ޔ‬180q࿁ォߩߔߴߡߩㅘㆊ㧔ᵿ᧻ࡎ࠻࠾ࠢࠬ␠⵾ AA50 ߅ࠃ߮ C4880-41S㧕↹௝ࠍߘߩ߹߹↪޿ߡ‫ޔ‬ౣ᭴ᚑࠍⴕߞߚ߽ߩߢߪ‫⹜ޔ‬㛎૕ࠍㅘㆊߒߚ X ✢ࠍⰯశ᧼ߢนⷞశߦ޽ࠆ‫⹜ޕ‬㛎૕ࠍ࿁ォߐߖࠆߣ‫ޔ‬X ✢ࡆ࡯ࡓߣၮᄌ឵ߒ‫ޔ‬㗼ᓸ㏜↪ኻ‛࡟ࡦ࠭ߦࠃߞߡ᜛ᄢߒߚ᧼ߩ㐳ᚻᣇะߣ߇ᐔⴕߦㄭߊߥࠆ࿁ォⷺߩ▸࿐ᓟ‫ޔ‬CCD ࠞࡔ࡜ߢ᠟ᓇߔࠆ߽ߩߢ޽ࠆ‫ޕ‬ߦ߅޿ߡߪ‫ޔ‬X ✢߇ၮ᧼ߩ㐳ᚻᣇะߦߪㅘㆊߒߒ߆ߒ‫⃻ޔ‬ታ⊛ߦ‫ޔ‬1Pm ⒟ᐲߩ㜞޿ಽ⸃⢻ࠍߦߊ޿ߩߢ‫ޔ‬ㅘㆊ↹௝ߩ S/N Ყ߇㕖Ᏹߦዊߐߊታ⃻ߔࠆߚ߼ߦߪ‫⹜ޔ‬㛎૕ࠍ X ✢ᬌ಴ⵝ⟎ߦนߥࠆ‫ޔ߼ߚߩߎޕ‬CT ↹௝ߦߪ‫ޔ‬ᢳ߼ᣇะߩ⋥✢⢻ߥ㒢ࠅㄭߠߌࠆᔅⷐ߇޽ࠆ‫ޔߚ߹ޕ‬ᄢ߈ߥ㔚⊛ߥᒝ޿ࠕ࡯࠹ࠖࡈࠔࠢ࠻߇⊒↢ߒ‫ࡃߛࠎߪޔ‬ሶၮ᧼ࠍ࿁ォߐߖࠆ႐ว‫ޔ‬X ✢߇ၮ᧼ߩ㐳ᚻᣇࡦࡊౝߩᓸ⚦⚵❱ࠍ߁߹ߊ್೎ߢ߈ߥ޿↹⾰ߣะߦߪㅘㆊߒߦߊ޿‫⹜ޔߡߞ߇ߚߒޕ‬㛎૕ࠍዊߥߞߚ‫ޕ‬

ߐߥኸᴺߦടᎿߖߑࠆࠍᓧߥ޿႐ว߇ᄙ޿‫ޕ‬ߎߩ໧㗴ࠍ⸃᳿ߒ‫ࠍ⾰↹ޔ‬ะ਄ߐߖࠆߚ߼ߦ‫ޔ‬޿ߊߟ߆ߩᚻᴺࠍᬌ⸛ߒߚ‫ޔߕ߹ޕ‬චಽߦ X ✢3. ⹜㛎ᣇᴺ

߇ㅘㆊߒߡ޿ߥ޿⚂ 20qߩ࿁ォⷺߦኻᔕߔࠆㅘ ⷰኤ↪ߩ⹜㛎૕ߪ‫ޔ‬Si ࠴࠶ࡊߣ FR-4 ၮ᧼߇‫ޔ‬ㆊ↹௝ࠍ↪޿ߕߦ‫ޔ‬CT ↹௝ߩౣ᭴ᚑࠍⴕߞߚ‫ޕ‬ࡑࠗࠢࡠߪࠎߛࡏ࡯࡞㧔Sn-37wt%Pb ౒᥏‫ޔ‬એਅ‫ޔ‬↹௝ b ߪ‫ ߩߎޔ‬CT ↹௝ࠍ␜ߔ‫ࠔࡈࠖ࠹࡯ࠕޕ‬౒᥏ߪࠎߛ㧕ߦࠃߞߡ‫ࡊ࠶࠴ࡊ࠶࡝ࡈޔ‬ធวߐࠢ࠻ߪᄢ᏷ߦૐᷫߐࠇ‫࡞࡯ࡏߛࠎߪޔ‬ౝߦ߅ߌࠇߚ᭴ㅧߢ޽ࠆ‫⋥ޕ‬ᓘ⚂ 150Pm ߩߪࠎߛࡏ࡯࡞ࠆ Sn ࡝࠶࠴⋧‫ޔ‬Pb ࡝࠶࠴⋧ߩฦ⋧߇್೎น⢻ߥ߇‫ ⚂ޔ‬250Pm 㑆㓒ߢජ㠽ߦ㈩೉ߐࠇߡ޿ࠆ‫߹ޕ‬߹ߢ↹⾰߇ᡷༀߐࠇߚ‫ޔߚ߹ޕ‬චಽߦ X ✢߇ㅘߚ‫⹜ޔ‬㛎૕ߩᄖᒻኸᴺߪ‫ޔ‬㐳ߐ 35mm᏷ 35mmㆊߒߡ޿ߥ޿㗔ၞߦኻߒߡ‫ࠛ࡝࡯ࡈޔ‬ᄌ឵ߦࠃෘߐ 1.0mm ߢ޽ࠆ‫ޕ‬ࠆ๟ᵄᢙⓨ㑆਄ߢᒝᐲࠍᓢ‫ߦޘ‬ᷫዋߐߖࠆࡈࠖ

 SP-PCT ࠍ↪޿‫࡞࡯ࡏߛࠎߪޔ‬ౝߩᓸ⚦⚵❱ߩ࡞࠲࡝ࡦࠣࠍታᣉߒߚ‫↹ޕ‬௝ c ߪ‫ ߩߎޔ‬CT ↹ⷰኤࠍ⹜ߺߚ‫⹜ޕ‬㛎૕ߣ X ✢ᬌ಴ⵝ⟎ߣ߇ᐓᷤ௝ࠍ␜ߔ‫ޕ‬චಽߣߪ޿߃ߥ޿߇‫ޔ‬ᢳ߼ᣇะߩࠕ

ߒߥ޿ࠃ߁ߦ‫ޔ‬20mm ⒟ᐲߩ〒㔌ࠍ߅޿ߡ⹜㛎૕࡯࠹ࠖࡈࠔࠢ࠻ߪ‫ⷰ❱⚵ޔ‬ኤߦᄢ߈ߥᓇ㗀ࠍਈࠍ࿁ォࠬ࠹࡯ࠫߦ࿕ቯߒߚ‫ޔߡߞ߇ߚߒޕ‬ᓧࠄ߃ߥ޿࡟ࡌ࡞߹ߢૐᷫߐࠇߚ‫ޕ‬ࠇࠆ CT ↹௝ߪ‫ࠍࠫ࠶ࠛ߿߿ޔ‬ᒝ⺞ߒߚ↹௝ߣߥᰴߦ‫ޔ‬චಽߦ X ✢߇ㅘㆊߒߡ޿ߥ޿㗔ၞߢߩࠆ‫⹜ߩߎޕ‬㛎૕ࠍ 180q࿁ォߐߖߡ 900㨪3600 ᨎ

ᖱႎ㊂ਇ⿷ࠍ⵬߁ߚ߼‫ోޔ‬ᛩᓇᢙࠍჇ߿ߒߡ CTߩㅘㆊ↹௝ࠍ᠟ᓇߒߚ‫ޕ‬ㅘㆊ↹௝৻ᨎ޽ߚࠅߩ X↹௝ߩ↹⾰ࠍᡷༀߔࠆߎߣࠍ⹜ߺߚ‫ޕ‬Fig.2 ߪ‫ޔ‬✢ߩ㔺శᤨ㑆ߪ 0.3 sec ߢ޽ࠆ‫ޔߚ߹ޕ‬ㅘㆊ↹௝ోᛩᓇᢙࠍ 900 ߆ࠄ 3600 ߩ▸࿐ߢᄌ߃ߚߣ߈ߩߩ᠟ᓇ㗔ၞߪ‫ޔ‬1000Pm656Pm ߣߒߚ‫ޕ‬ㅘㆊ↹CT ↹௝ߩᲧセࠍ␜ߔ‫ోޕ‬ᛩᓇᢙࠍჇ߿ߔߎߣߦ௝߆ࠄ CT ↹௝ߩౣ᭴ᚑߦߪ‫ߺ⇥ޔ‬ㄟߺㅒᛩᓇᴺࠃࠅ‫ޔ‬ᓸ⚦⚵❱߇᣿⏕ߦߥࠅ‫ߚ߹ޔ‬ᢳ߼ᣇะߩ

㧔Convolution back-projection method㧕ࠍ↪޿ߚ‫ޕ‬ࠕ࡯࠹ࠖࡈࠔࠢ࠻߽ૐᷫߔࠆലᨐ߇޽ߞߚ‫ޕ‬CT ↹௝ߦ߅޿ߡߪ‫ޔ‬LAC ୯ߩಽᏓࠍ⴫␜ߔࠆߎߣߢ‫ޔ‬Pb ࡝࠶࠴⋧߅ࠃ߮ Sn ࡝࠶࠴⋧ߩᒻ⁁ࠍน

5. ߹ߣ߼ⷞൻߔࠆߎߣ߇ߢ߈ࠆ‫ޔ߅ߥޕ‬X ✢ࠛࡀ࡞ࠡߣ ᡼኿శశḮࠍ೑↪ߒߚ X ✢ࡑࠗࠢࡠ CT ⵝ⟎ߒߡ‫ޔ‬Sn ߩ K ๆ෼┵ࠃࠅ߽߿߿ૐ޿ 29.0keV ࠍ㧔SP-PCT㧕ࠍ↪޿ߡ‫ޔ‬㔚ሶၮ᧼㧔ࡈ࡝࠶ࡊ࠴࠶

ㆬᛯߒߚ‫ޕ‬ࡊߪࠎߛធว᭴ㅧ૕ߩߪࠎߛធวㇱ㧕ࠍ‫ޔ‬㕖⎕უߢⷰኤߒߚ‫ޕ‬㔚ሶၮ᧼ߩᒻ⁁⊛ߥ․ᓽ㧔㕙Ⓧ



ߪᐢ޿߇⭯޿㧕ࠍ⠨ᘦߒ‫ޔ‬ਇቢోߥㅘㆊ↹௝࠺ෳ⠨ᢥ₂࡯࠲߆ࠄ⚵❱ⷰኤࠍⴕ߁ߚ߼ߦචಽߥ↹⾰ߩ CT1) Uesugi, K. et al., Nucl. Instr. Method., Sec. A,Vol. 467-468 (2001), 853-856.

↹௝ࠍౣ᭴ᚑߔࠆߎߣ߇น⢻ߣߥߞߚ‫੹ޕ‬ᓟ‫ޔ‬ታ㓙ߩ㔚ሶၮ᧼᭴ㅧߩⷰኤߦኻߒߡ‫ޔ‬SP-PCT ࠍ2) Tsuritani, H. et al., Proc. of InterPACK’07,ㆡ↪ߔࠆߎߣ߇ᦼᓙߐࠇࠆ‫ޕ‬ASME, New York (2007), IPACK2007-33170

Fig.1

Quality improvement of CT images reconstructed using imperfect projection data

Fig.2

CT images reconstructed using various set of projections with different angularincrements