Capacitance Diaphragm Gauge
Stripe™ CDG100Dhs

Operating Manual

Incl. EU Declaration of Conformity

tina95e1-a(2019-07)

1

Product Identification
In all communications with INFICON, please specify the information given on the product nameplate. For convenient reference copy that information into the space provided below.
Model:
PN:
SN:

V

W

ValidityThis document applies to products of the Stripe CDG100Dhs
series.
Part numbers of standard products are indicated below. OEM
products have other part numbers and different parametersettings (e.g. factory setting of setpoint) as defined in thecorresponding ordering information.

2

tina95e1-a(2019-07)

The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in thisdocument correspond to gauges with DN 16 ISO-KF vacuum
connection. They apply to gauges with other vacuum connections by analogy.
We reserve the right to make technical changes without priornotice.

tina95e1-a(2019-07)3

Intended Use
The temperature compensated Capacitance Diaphragm Gaugesof the Stripe CDG100Dhs series are intended for absolutepressure measurement of gases in their respective pressure
ranges (→  3).
Ideally the measurement values can be read out digitally via
EtherCAT interface or analog. The gauges can also be operated
in connection with an INFICON Vacuum Gauge Controller (VGC
series) or another appropriate controller.

Functional Principle

A ceramic diaphragm is deflected by pressure. The deflection ismeasured capacitively and converted into a digital or into ananalog linear output signal by the digital electronics. The digital
output signal can only be read out via the EthreCAT interface.
The output signal is independent of the gas type.
Very accurate pressure measurement is achieved by heating thesensor to a constant temperature of 100°C which results in acompensation of changes in the ambient conditions and a reduced deposition of process products and by-products in process applications.

Trademarks
Stripe™ INFICON GmbH
VCR® Swagelok Marketing Co.

Patents
EP 1070239 B1, 1040333 B1
US Patents 6528008, 6591687, 7107855, 7140085

4

tina95e1-a(2019-07)

Scope of Delivery
1× gauge Stripe CDG100Dhs
1× pin for adjusting settings via buttons
1× insulation shell
1× Calibration Test Report
1× Operating Manual German
1× Operating Manual English

tina95e1-a(2019-07)

5

Contents

6

Product Identification
Validity
Intended Use
Functional Principle
Trademarks
Patents
Scope of Delivery

2
2
4
4
4
4
5

1 Safety
1.1 Symbols Used
1.2 Personnel Qualifications
1.3 General Safety Instructions
1.4 Liability and Warranty

8
8
8
9
9

2

10

Technical Data

3 Installation
3.1 Vacuum Connection
3.2 Power Connection
3.2.1 D-sub, 15-pin Connector
3.2.2 EtherCAT Connector
3.2.3 Mini USB Type B Connector (Diagnostic Port)

16
16
20
21
22
23

4 Operation
4.1 Status Indication
4.2 Zeroing the Gauge
4.2.1 <ZERO> Adjustment
4.2.2 <ZERO> Adjustment with Ramp Function
4.3 Switching Functions SP1, SP2, ATM, Status
4.3.1 Adjusting the Vacuum Pressure Setpoints(SP1 & SP2)
4.3.2 Programming the ATM Setpoint
4.3.3 Programming Gauge Status
4.4 Activating the Factory Setting (Factory Reset)
4.5 Diagnostic Port (USB Interface)
4.6 EtherCAT Operation

24
24
25
26
27
29
31
34
35
35
36
37

5 Deinstallation
5.1 Power Connection
5.2 Vacuum Connection

38
38
38

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6

Maintenance, Repair

7

Returning the Product

41
41

8

Disposal

42

Further Information

43

EU Declaration of Conformity

45

For cross-references within this document, the symbol (→  XY)
is used, for cross-references to further documents, listed under"Further Information", the symbol (→  [Z]).

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7

1

Safety1.1

Symbols Used
DANGER
Information on preventing any kind of physical injury.

WARNING
Information on preventing extensive equipment and environmental damage.

CautionInformation on correct handling or use. Disregard can lead tomalfunctions or minor equipment damage.
Notice<…>1.2

Labeling

Personnel Qualifications
Skilled personnel
All work described in this document may only be carried out by
persons who have suitable technical training and the necessary experience or who have been instructed by the end-userof the product.

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1.3

General Safety Instructions• Adhere to the applicable regulations and take the necessary
precautions for the process media used.
Consider possible reactions with the product materials.
• Adhere to the applicable regulations and take the necessary
precautions for all work you are going to do and consider thesafety instructions in this document.
• Before beginning to work, find out whether any vacuum components are contaminated. Adhere to the relevant regulations
and take the necessary precautions when handling contaminated parts.
Communicate the safety instructions to all other users.

1.4

Liability and Warranty
INFICON assumes no liability and the warranty becomes nulland void if the end-user or third parties• disregard the information in this document• use the product in a non-conforming manner• make any kind of interventions (modifications, alterations etc.)
on the product• use the product with accessories not listed in the productdocumentation.
The end-user assumes the responsibility in conjunction with theprocess media used.
Gauge failures due to contamination are not covered by thewarranty.

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9

2Technical Data
Measurement range
Accuracy 1)
0.1 … 0.5 F.S.
0.1 … 1100 F.S.
Temperature effect on zero
0.1 … 0.5 F.S.
1 … 1100 F.S.
Temperature effect on span
Resolution
Gas type dependence
Output signal analog(measurement signal)
Measurement range
Voltage range
Relationship voltage-pressure
Output impedance
Loaded impedance
Measurement rate
Step response time 2)(analog output signal)
Delay time
(digital output signal, EtherCAT
interface)

1)
2)
3)

10

→ "Validity"
0.4% of reading
0.2% of reading
0.0050% F.S./ °C
0.0025% F.S./ °C
0.02% of reading / °C
0.003% F.S.
none

0 … +10 V–5 … +10.5 V(limited to +10.5 V)
linear0 Ω (short-circuit proof)>10 kΩ
1 kHz
2 … 20 ms 3)
2 ms

Non-linearity, hysteresis, repeatability at 25 °C ambient operating
temperature without temperature effects after operation of 2 h.
Increase 10 … 90 % F.S.R.
Depending on pressure range, conductance vacuum connection and thedefault filter setting.
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Identification
Resistance RIdent
Voltage
Remote Zero Adjust
External switching contact
Pulse
Switching functions
Setpoints
Setting range SP1 & SP2
Setting range ATM
4)

Hysteresis
Switching characteristics 4)
Relay contact
closedopen
Status relay
Relay contact
closedopen
Diagnostic port
Cable

4)

tina95e1-a13.2 kΩ referenced to supply common≤5 V
digital input for zero adjustment with external switchingcontact (→  26)
30 V (dc) / <5 mA (dc)
>1 s … <5 ssetpoints SP1& SP2, ATM,status
1 … 99% F.S.
factor 0.5 … 1.1 from ATM
pressure
1% F.S.
Low Trip Point (default)
High Trip Point
30 V (dc) / ≤0.5 A (dc)floating (NO)LED lit solid
LED off
30 V (dc) / ≤0.5 A (dc)connected to supply common (pin 5)
measurement mode
warningno supply voltage
warming up, error
Mini USB type B, 5-pin
USB cable type A/mini B

The hysteresis and the switching characteristics can be programmed via
the serial interface or the diagnostic port.
(2019-07)11

EtherCAT interface
Specification, data format,
communication protocol
3CD9-xxx-2380
3CD9-xxx-23G0
Data rate
Note address
Physical layer
EtherCAT connector
Cable
Cable length→  [7], [8]→  [9], [10]100 Mbps
explicit device identification
100Base-Tx (IEEE 802.3)
2×RJ45, 8-pin, socket
input and output
8-pin, shielded, Ethernet
Patch Cable (CAT5e quality
or higher)≤100 mFor further information on the EtherCAT interface →  [5], [6]SupplyDANGER
The gauge may only be connected to power supplies, instruments or control devices that conformto the requirements of a grounded protective extralow voltage (PELV). The connection to the gauge
has to be fused 5).
Supply voltage
at the gauge+14 … +30 V (dc) or±15 V (dc)Power consumption
while being heated≤16 W
at operating temperature≤11 W
Fuse to be connected 5)
1.6 AT
The gauge is protected against reverse polarity of the supply
voltage and overload.
5)

12

INFICON controllers fulfill this requirement.
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Electrical connection
Sensor cable

15-pin D-sub, male
15-pin plus shielding

Cable length
Supply voltage 15 V

≤ 8 m (0.14 mm²/conductor)≤15 m (0.25 mm²/conductor)
Supply voltage 24 V
≤43 m (0.14 mm²/conductor)≤75 m (0.25 mm²/conductor)
Supply voltage 30 V
≤88 m (0.14 mm²/conductor)≤135 m (0.25 mm²/conductor)
For longer cables, larger conductor cross-sections are required(Rcable ≤1.0 Ω).
Grounding concept→ "Power Connection"

Materials exposed to vacuum

ceramics (Al2O3 ≥99.5%),
stainless steel AISI 316L
3
≤4.2 cm

Internal volume
Admissible pressure (absolute)
1000 / 1100 F.S.
1 … 500 F.S.
0.1 … 0.5 F.S.
Bursting pressure (absolute)
Admissible temperatures
Storage
Operation
Bakeout
Relative humidity
Use
Degree of protection
Mounting orientation

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4 bar
2.6 bar
1.3 bar
6 bar| 400 kPa
| 260 kPa
| 130 kPa
| 600 kPa

–20 °C … +85 °C+10 °C … +50 °C≤110 °C at the flange≤80% at temperatures≤+31 °C, decreasing to 50%
at +40°C
indoors only, altitude up to3000 m NN
IP 30
standing upright to horizontal

13110.4ø85

3.8

Dimensions [mm]

15.7

31.5

ø82

DN 16 ISO-KF½¨ tubeDN 16 CF-R
8VCR
femaleWeight14

837 … 897 gtina95e1-a(2019-07)

Analog Measurement Signal vs. Pressure
Pressure p
1.1×F.S.
1.0×F.S.
0.9×F.S.
0.8×F.S.
0.7×F.S.
0.6×F.S.
0.5×F.S.
0.4×F.S.
0.3×F.S.
0.2×F.S.
0.1×F.S.
0.0×F.S.

0

1

2

3

4

5

6

7

Measurement Uout [V]

8

9

10

p = (Uout / 10 V) × p (F.S.)
Conversion Torr ↔ Pascal

c

Torr

mbar 6)

Pa 4)

1.00

1013.25 / 760 =
1.3332…

101325 / 760 =
133.3224…

Example: Gauge with 10 Torr F.S.
Measurement signal Uout = 6 V
p = (6 V / 10 V) × 10 Torr
= 0.6 × 10 Torr = 6 Torr6)

tina95e1-a

Source: NPL (National Physical Laboratory)
Guide to the Measurement of Pressure and Vacuum, ISBN 0904457x /1998(2019-07)15

3

Installation
WARNINGWARNING: fragile components
The ceramic sensor may be damaged by impacts.
Do not drop the product and prevent shocks andimpacts.

DANGER
Hot surface
Touching the hot surface (>65 °C) can causeburns.
Protect hot parts to prevent accidental contact andmount warning signs.

3.1

Vacuum Connection
DANGER
Overpressure in the vacuum system >1 bar
Injury caused by released parts and harm causedby escaping process gases can result if clamps are
opened while the vacuum system is pressurized.
Do not open any clamps while the vacuum system
is pressurized. Use the type clamps which aresuited to overpressure.

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DANGER
Overpressure in the vacuum system >2.5 bar
KF flange connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures. Process
media can thus leak and possibly damage yourhealth.
Use O-rings provided with an outer centering ring.

DANGER
Protective ground
Products that are not correctly connected to groundcan be extremely hazardous in the event of a fault.
Electrically connect the gauge to the groundedvacuum chamber. This connection must conform to
the requirements of a protective connection according to EN 61010:• CF and VCR flanges fulfill this requirement.
• For gauges with a KF flange, use a conductive
metallic clamping ring.
• For gauges with a ½" tube, take appropriate
measures to fulfill this requirement.

CautionVacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to ensure cleanliness and prevent
damages.

tina95e1-a(2019-07)17

Caution
Dirt sensitive area
Touching the product or parts thereof with barehands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
tools when working in this area.

Mount the gauge so that no vibrations occur.

Mounting orientation

standing upright tohorizontal

If adjustment should be possible after the gauge has been installed, be sure to install it so that the buttons can be accessedwith a pin.

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 Remove the protective lid and connect the product to thevacuum system.

Seal withcentering ring

Protective lid
Clamp

Keep the protective lid.

 Mount the insulation shell.
Insulation shell

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19

3.2

Power Connection
Make sure the vacuum connection is properly made(→  16).

DANGER
The gauge may only be connected to power supplies, instruments or control devices that conformto the requirements of a grounded protective extralow voltage (PELV) The connection to the gauge
7)
has to be fused .

Ground loops, differences of potential, or EMC problems
may affect the measurement signal. For optimum signal
quality, please do observe the following notes:• Use an overall metal braided shielded cable. The
connector must have a metal case.
• Connect the cable shield to ground at one side via theconnector case. Make sure the connector case has
direct contact to the cable's shield on its whole circumference. Do not connect the other side of theshield.
• Connect the supply common with protective grounddirectly at the power.
• Use differential measurement input (signal commonand supply common conducted separately).
• Potential difference between supply common andhousing ≤18 V (overvoltage protection).

7)

20

INFICON controllers fulfill this requirement.
tina95e1-a(2019-07)

3.2.1D-sub, 15-pin Connector
If no sensor cable is available, make one according to thefollowing diagram (cable length and conductor cross-sections→  13).
Status
SP1
SP2
Ident

1M

680 nF

18 V

10 Ω

3
4
1
8
9
10
13
14
2
12
7
11
5
6

RemoteZero Adjust

14…30 V

15
case

Electrical connection
Pin 1, 4
Pin 2
Pin 3
Pin 5
Pin 7, 11
Pin 8, 9
Pin 10
Pin 12
Pin 15
Case

Relay SP1, closing contact
Signal output (measuring
signal) or thresholds SP1/2
StatusSupply common
Supply (+14…+30 V)
Relay SP2, closing contact
Gauge identification or
Remote Zero Adjust
Signal common
Housing (Chassis Ground)
Connector case

9

1

15

8

D-sub, 15-pin
femalesoldering sidePin 6, 13, 14: n.c.

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3.2.2EtherCAT Connector
EtherCAT is a communications interface. It is powered
via the sensor cable.
If no EtherCAT cables are available, make them according to thefollowing diagram. Connect the EtherCAT cables.
FCC68, 8-pin, soldering side
8

1

Pin 1
TD+
Transmission data +Pin 2
TDTransmission data Pin 3
RD+
Receive data +Receive data Pin 6
RDPin 4, 5, 7 and 8: n.c.
FCC68 cable<OUT> port
FCC68 cable<IN> port

Sensor cable22

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3.2.3

Mini USB Type B Connector (Diagnostic Port)A standard USB cable can be used. If no cable is available,
make one according to the following diagram. Connect the cable.
Mini USB typ B, soldering side
5

1

Pin 1
Pin 2
Pin 3
Pin 4
Pin 5

VBUS (5 V)
DD+
ID
GND
Mini USB type B

tina95e1-a(2019-07)23

4

Operation
Put the gauge into operation. If you are using an INFICON controller, define the measurement range (→  [1], [2], [3]).
A warm-up time of at least 90 minutes should be allowed; forprecise pressure measurements a warm-up time of at least
3 hours is required.

4.1

Status Indication

LED

LED status

Meaning<STATUS>off
lit solid green
blinking green
short blinks
long blinks
lit solid red
lit green green
blinking green
off
lit solid green
blinking green
off

no supply voltage
measurement mode

<SP1>

<SP2>

warning, over/underrange
warming up
error
setpoint 1 closed
waiting for setpoint 1 input
setpoint 1 open
setpoint 2 closed
waiting for setpoint 2 input
setpoint 2 open

EtherCAT LEDs →  [5], [6].

24tina95e1-a(2019-07)

4.2

Zeroing the Gauge
The gauge is factory calibrated while "standing upright"(→ "Calibration Test Report").
Perform a zero adjustment, when the gauge is operated
for the first time.
Due to long time operation or contamination, a zero drift could
occur and zero adjustment may become necessary.
For adjusting the zero, operate the gauge under the same constant ambient conditions and in the same mounting orientation
as normally.
The output signal (measuring signal) is depending on the mounting orientation. The signal difference between the vertical andhorizontal mounting orientation is:F.S.

∆U / 90°

1000 Torr/mbar
100 Torr/mbar
10 Torr/mbar
1 Torr/mbar
0.1 Torr/mbar≈2 mV≈10 mV≈50 mV≈300 mV≈1.8 V

If the gauge is operated via a controller, the zero of thewhole measuring system has to be adjusted on thecontroller: first, adjust the zero of the gauge and then,the zero of the controller.

tina95e1-a(2019-07)25

4.2.1<ZERO> Adjustment
The zero can be adjusted via• the <ZERO> button on the gauge,• the diagnostic port (→  [4]),• the EtherCAT interface (→  [5], [6]),• the digital input "Remote Zero": Apply the supply
voltage to pin 10 (pulse →  11),• an INFICON Vacuum Gauge Controller (VGC series).
While the gauge is being heated and/or under atmospheric pressure, the zeroing function is locked in orderfor operating errors to be prevented.

 Evacuate the gauge to a pressure according to the tablebelow:
F.S.
1100
1000
500
200
100
50
20
10
5
2
1
0.5
0.25
0.1

mbar
Torr
Torr/mbar
Torr/mbar
Torr/mbar
Torr/mbar
Torr/mbar
Torr/mbar
Torr/mbar
Torr/mbar
Torr/mbar
Torr/mbar
Torr/mbar
Torr/mbar

Recommended final pressure forzero adjustment−<5×10-2 Torr
<3×10-2 Torr
<10-2 Torr
<5×10-3 Torr
<3×10-3 Torr
<10-3 Torr
<5×10-4 Torr
<3×10-4 Torr
<10-4 Torr
<5×10-5 Torr
<3×10-5 Torr
<10-5 Torr
<5×10-6 Torr0

<7×10 Pa
<7×100 Pa<4×100 Pa<2×10-0 Pa<7×10-1 Pa<4×10-1 Pa<2×10-1 Pa<7×10-2 Pa<4×10-2 Pa<2×10-2 Pa<7×10-3 Pa<4×10-3 Pa<2×10-3 Pa<7×10-4 Pa-2<7×10 mbar−
<4×10-2 mbar
<2×10-2 mbar
<7×10-3 mbar
<4×10-3 mbar
<4×<10-3 mbar
<7×10-4 mbar
<4×10-4 mbar
<2×10-4 mbar
<7×10-5 mbar
<4×10-5 mbar
<2×10-5 mbar
<7×10-6 mbar

If the final pressure is too high for zero adjustment (>25%of the F.S.), the zero cannot be reached and the<STATUS> LED blinks green. If this is the case, activate
the factory setting and adjust the zero again (→  35).

26

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 Operate the gauge for at least 2 hours (until the signal isstable).

 Briefly press the <ZERO> button with a pin (max.
ø1.1 mm), or …

Press thebutton briefly
max. ø1.1 mm… apply supply voltage to Remote Zero at pin 10(pulse →  11).
The zero adjustment runs automatically. The <STATUS>
indicator flashes until the adjustment (duration ≈8 s) iscompleted.
After zero adjustment, the gauge automatically returns
to the measurement mode.
The <STATUS> LED blinks green if• the signal output is negative (< -20 mV) when the final pressure has been attained• the zero adjustment has failed.

4.2.2<ZERO> Adjustment with Ramp Function
The ramp function allows to adjust the pressure value at aknown reference pressure within the measurement range of thegauge.

tina95e1-a(2019-07)27

It also permits to adjust an offset of the characteristic curve inorder to• compensate for the offset of the measuring system or• obtain a slightly positive zero for a 0 … 10 V AD converter.
The offset should not exceed 5% of the F.S. (+500 mV). At ahigher positive offset, the upper limit of the measurement range
is exceeded.
Zero adjustment using the ramp function can be
performed via• the <ZERO> button on the gauge,• the EtherCAT interface (→  [5], [6]),• the diagnostic port (→  [4]),Recommended procedure for adjusting the offset of ameasuring system: → Notice  25.

 Operate the gauge for at least 2 hours (until the signal isstable).

 Push the <ZERO> button with a pin (max. ø1.1 mm) andkeep it depressed. The <STATUS> LED starts blinking.
After 5 s, the zero adjustment value, starting at the current
output value, keeps continually changing (ramp) until the
button is released or until the setting limit (max. 25% F.S.)
is reached.
Keep the button
depressed
max. ø1.1 mm

28

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• Change of direction (inverse ramp): Release the button.
Press and keep it depressed again within 3 … 5 s (theflashing frequency of the <STATUS> indicator changes
briefly).
• Fine adjustment: Release the button. Briefly press it
again within 0 … 3 s. The zero adjustment value changes by one unit.
If the <ZERO> button is released for more than 5 s, thegauge returns to the measurement mode.
The <STATUS> LED blinks green if the signal output is negative(< -20 mV).

4.3

Switching Functions SP1, SP2, ATM, Status
The gauge provides two adjustable and programmable switching
functions, which are independent of each other. A switchingcontact is provided for each switching function:• Vacuum pressure set points SP1 & SP2 (default)• Atmospheric pressure set point (ATM set point)• Gauge status

Switching characteristics and hysteresis of the set
points• Low Trip Point (default)• High Trip Point
The switching characteristics and the hysteresis of eachset point can only be programmed via the diagnostic
port (→  [4]) and the EtherCAT interface (→  [5],[6]).

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29

Low Trip Point (default)
If the pressure in the vacuum system is lower than the setpoint,
the corresponding LED (<SP1> or <SP2>) is lit solid and thecorresponding switching contact is closed.

Measurement signal(pressure p)
Reset value
Setpoint

Hysteresis(1% F.S.)
Threshold value

Time t
Off

On

Off

High Trip Point
If the pressure in the vacuum system is higher than the setpoint,
the corresponding LED (<SP1> or <SP2>) is lit solid and thecorresponding switching contact is closed.

Measurement signal(pressure p)
Threshold value
Setpoint

Hysteresis(1% F.S.)

Reset value

Time t
Off

30

On

Off
tina95e1-a(2019-07)

4.3.1

Adjusting the Vacuum Pressure Setpoints (SP1 &SP2)The two setpoints can be set to any pressure within the measurement range of the gauge.
The thresholds of the setpoints SP1 & SP2 can be
adjusted via• the buttons on the gauge• the diagnostic port (→  [4])• the EtherCAT interface (→  [5], [6]).
The current threshold setting• is output at the measurement signal output instead of thepressure signal and can be measured with a voltmeter after
the <SP> button is pressed• can be read via the diagnostic port (→  [4]) and the
EtherCAT interface (→  [5], [6]).

DANGERDANGER: malfunction
If processes are controlled via the signal output,
keep in mind that by pushing an <SP> button themeasurement signal is suppressed and the corresponding threshold value is output instead. Thiscan cause malfunctions.
Push the <SP> button only if you are sure that no
malfunction will cause.

The setpoints can be adjusted via• the buttons on the gauge,• the diagnostic port (→  [4])• the EtherCAT interface (→  [5], [6]).

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31

Adjusting Setpoint <1>

 Push the <SP> button with a pin (max. ø1.1 mm). The

gauge changes to the switching function mode and outputs
the current threshold value at the measurement value
output for about 10 s (LED <1> blinks).

Press the button
max. ø1.1 mm

 For changing the threshold value, push the <ZERO> button
and keep it depressed. The threshold keeps changing fromthe current value (ramp) until the button is released or until
the limit of the setting range is reached.
Keep the button
depressed
max. ø1.1 mm

32

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• Change of direction (inverse ramp): Release the button.
Press and keep it depressed again within 3 … 5 s (theflashing frequency of the <STATUS> indicator changes
briefly).
• Fine adjustment: Release the button. Briefly press it
again within 0 … 3 s. The threshold value changes by
one unit.
If the <ZERO> button is released for more than 5 s, thegauge returns the measurement mode.
The factory setting of the reset value is 1% F.S. above
the Low Trip Point and 1% F.S. below the High Trip
Point (hysteresis).
If after programming of the hysteresis the button <SP> ispushed, the factory setting of the hysteresis (1%) isreactivated.
Programming setpoint SP1
Programmable parameters:(→  [4], [5], [6])Low Trip Point
Low Trip Enable
Low Trip Point Hysteresis
High Trip Point
High Trip Enable
High Trip Point Hysteresis
Setpoint Mode

Adjusting setpoint SP2
The adjustment procedure is the same as for setpoint SP1.

tina95e1-a(2019-07)33

4.3.2

Programming the ATM Setpoint
The vacuum pressure setpoints SP1 & SP2 can be programmed
to atmospheric pressure setpoint (ATM setpoint) via the diagnostic port (→  [4]) or the EtherCAT interface (→  [5], [6]).
Switching characteristics Low / High Trip Point and hysteresis→  29.
The threshold value of the ATM setpoint is defined as a factor of
the current atmospheric pressure. The switching contact switches when the pressure in the vacuum system has reached thedefined threshold value.
Example: Setpoint of the High Trip Point with threshold 110% of
the atmospheric pressure (= factor 1.1)
Hysteresis: 1%

Measurement signal(pressure p)
ATM setpoint 110%(= factor 1.1)
Threshold value
1078 mbar

Hysteresis (1% F.S.)
Atmospheric pres/sure (ambience)

980 mbar

Off

34

On

Reset valueOff

tina95e1-a(2019-07)

The current ATM threshold setting• can be read / written via the diagnostic port (→  [4])• can be read / written via the EtherCAT interface(→  [5], [6]).
Programming ATM setpoint
Programmable parameters:(→  [4], [5], [6])Factor of ATM
Low Trip Enable
Low Trip Point Hysteresis
High Trip Enable
High Trip Point Hysteresis
Setpoint Mode

Switching characteristics of the setpoints →  29.
Diagnostic port →  [4].

4.3.3Programming Gauge Status
The vacuum pressure setpoints SP1 & SP2 can be programmed
to gauge status via the diagnostic port (→  [4]) or the
EtherCAT interface (→  [5], [6]).
The status of the gauge is output as a digital signal.

4.4

Activating the Factory Setting (Factory Reset)
All user defined parameters (e.g. zero, filter) are restored to theirdefault values.
Loading of the default parameters is irreversible.

tina95e1-a(2019-07)35

Loading the default parameters:

 Put the gauge out of operation.
 Keep the <ZERO> button depressed for at least 5 s while
the gauge is being put into operation (Power ON).

4.5

Diagnostic Port (USB Interface)
The diagnostic port <DIAG> permits to output the pressure
reading and all status information and to enter all settings at thesame time (→  [4]). A standard USB cable type A/mini B canbe used.
Required software: T-Gauge. Please contact your local INFICON
service center.

Mini USB type B

36

tina95e1-a(2019-07)

4.6

EtherCAT Operation
CautionCaution: data transmission errors
Any attempt to simultaneously operate the gauge
via the EtherCAT interface and the diagnostic port
causes data transmission errors.
Therefore the gauge must not be operated simultaneously via the EtherCAT interface and the diagnostic port.
For operating the gauge via EtherCAT, prior installation of thedevice specific ESI file is required on the bus master side. This
file can be downloaded from our website (www.inficon.com).

Explicit Device Address Setting (default 00hex)
During device initialization, the device address switches are readby the device firmware. This device address is supported to themaster as Explicit Device Identification.
24 6 24 6 24 6
8
80
0
80
E A E A E A

The explicit device address is set in hexadecimal form (00 … FFFhex) via the<x100>, <x10> and <x1> switches.

Example: Device address = 0xDDD (dec 3549):
0x100 * 0xD (dec 3328) + 0x10 * 0xD (dec 208) + 0x1 * 0xD(dec 13)

Status LED
LEDs on the gauge inform on the gauge status and the current
EtherCAT status (→  [5], [6]).
tina95e1-a(2019-07)37

5

Deinstallation
Preconditions:• Vacuum system vented• Vacuum system cooled to <50 °C

5.1

Power Connection

 Put the gauge out of operation.
 Unfasten the lock screws and disconnect the sensor cable.
5.2

Vacuum Connection
DANGER
Hot surface
Touching the hot surface (>65 °C) can causeburns.
Put the product out of operation and allow it to cool
down.

WARNING
Fragile components
The ceramic sensor may be damaged by impacts.
Do not drop the product and prevent shocks andimpacts.

38

tina95e1-a(2019-07)

DANGERContaminated parts
Contaminated parts can be detrimental to healthand environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.

CautionVacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to ensure cleanliness and prevent
damages.

CautionDirt sensitive area
Touching the product or parts thereof with barehands increases the desorption rate.
Always wear clean, lint-free gloves and use clean
tools when working in this area.

tina95e1-a(2019-07)39

 Remove the insulation shell.
Insulation shell

Open both sides

 Remove the gauge from the vacuum system and install theprotective lid.

40

tina95e1-a(2019-07)

6

Maintenance, Repair
Under clean operating conditions, the product requires no maintenance.
Gauge failures due to contamination are not covered by
the warranty.
We recommend checking the zero at regular intervals(→  26).
INFICON assumes no liability and the warranty becomes nulland void if any repair work is carried out by the end-user or third
parties.

7

Returning the Product
WARNING
Forwarding contaminated productsContaminated products (e.g. radioactive, toxic,
caustic or microbiological hazard) can be detrimental to health and environment.
Products returned to INFICON should preferably befree of harmful substances. Adhere to the forwarding regulations of all involved countries and forwarding companies and enclose a duly completed
declaration of contamination *).
*)Form under www.inficon.com

Products that are not clearly declared as "free of harmful substances" are decontaminated at the expense of the customer.
Products not accompanied by a duly completed declaration ofcontamination are returned to the sender at his own expense.
tina95e1-a(2019-07)41

8

Disposal
DANGER
Contaminated parts
Contaminated parts can be detrimental to healthand environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.

WARNING
Substances detrimental to the environment
Products or parts thereof (mechanical and electriccomponents, operating fluids etc.) can be detrimental to the environment.
Dispose of such substances in accordance with therelevant local regulations.

Separating the components
After disassembling the product, separate its components according to the following criteria:• Contaminated components
Contaminated components (radioactive, toxic, caustic or biological hazard etc.) must be decontaminated in accordancewith the relevant national regulations, separated according totheir materials, and disposed of.
• Other components
Such components must be separated according to their materials and recycled.

42

tina95e1-a(2019-07)

Further Information
 [1]Operating ManualSingle-Channel Controller VGC401
tinb01e1
INFICON AG, LI–9496 Balzers, Liechtenstein [2]Operating ManualTwo- & Three-Channel Measurement and Control Unit
VGC402, VGC403
tinb07e1
INFICON AG, LI–9496 Balzers, Liechtenstein [3]Operating Manual
One-, Two- & Three-Channel Measurement and Control
Unit VGC501, VGC502, VGC503
tina96e1
INFICON AG, LI–9496 Balzers, Liechtenstein [4]Communication Protocol
Diagnostic Port via T-Gauge
tira84e1
INFICON AG, LI–9496 Balzers, Liechtenstein [5]Communication Protocol
EtherCAT CDG100Dhs(ETG.5003.2080 S (R) V1.0.0)

tira68e1
INFICON AG, LI–9496 Balzers, Liechtenstein [6]Communication Protocol
EtherCAT CDG100Dhs(ETG.5003.2080 S (R) V1.3.0)

tirb45e1
INFICON AG, LI–9496 Balzers, Liechtenstein [7]ETG.5003.1 S (R) V1.0.0: Semiconductor Device profile– Part 1: Common Device Profile (CDP) [8]ETG.5003.2080 S (R) V1.0.0: Semiconductor Device
profile – Part 2080: Specific Device Profile (SDP):
Vacuum Pressure Gauge [9]ETG.5003.1 S (R) V1.1.0: Semiconductor Device profile– Part 1: Common Device Profile (CDP)

tina95e1-a(2019-07)43

 [10] ETG.5003.2080 S (R) V1.3.0: Semiconductor Device

profile – Part 2080: Specific Device Profile (SDP):
Vacuum Pressure Gauge

44

tina95e1-a(2019-07)

EU Declaration of Conformity
We, INFICON, hereby declare that the equipment mentioned
below complies with the provisions of the following directives:• 2014/30/EU, OJ L 96/79, 29.3.2014(EMC Directive; Directive relating to electromagnetic compatibility)• 2011/65/EU, OJ L 174/88, 1.7.2011(RoHS Directive; Directive on the restriction of the use of certain hazardous substances in electrical and electronic equipment)

Product

Capacitance Diaphragm Gauge
Stripe CDG100Dhs
Standards
Harmonized and international/national standards and specifications:• EN 61000-6-2:2005 (EMC: generic immunity standard)•

EN 61000-6-3:2007 + A1:2011 (EMC: generic emission•

EN 61010-1:2010 (Safety requirements for electrical equipment for•

EN 61326:2013; Group 1, Class B (EMC requirements forstandard)

measurement, control and laboratory use)electrical equipment for measurement, control and laboratory use)

Manufacturer / Signatures
INFICON AG, Alte Landstraße 6, LI-9496 Balzers
5 July 2019

5 July 2019

Dr. Bernhard Andreaus
Director Product Evolution

Alex Nef
Product Manager

tina95e1-a(2019-07)45

Notes46

tina95e1-a(2019-07)

Notestina95e1-a(2019-07)

47

Original: German tina95d1-a (2019-07)
t i na95e1-a

LI–9496 Balzers
LiechtensteinTel +423 / 388 3111
Fax +423 / 388 3700
reachus@inficon.com
www.inficon.com