O P E R A T I N G
iina70en1-15-(2202)

M A N U A L

Translation of the original handbook

Catalog-No.
UL 1000:
550 - 000A
550 - 001A
550 - 002A
UL 1000 Fab:
550 - 100A
550 - 101A

from software version V5.17

UL1000 / UL1000 FabHelium Leak Detector

2

iina70en content.fm(2202)

Operating Manualiina70en content.fm(2202)

Operating Manual

Table of Contents
1

General Information

7

1.1
1.1.1
1.1.2
1.1.3
1.1.4
1.2
1.3
1.3.1
1.3.2
1.3.2.1
1.3.2.2
1.3.2.3
1.3.2.4
1.4
1.4.1
1.4.2
1.4.2.1
1.4.2.2
1.4.2.3
1.4.2.4
1.4.2.5
1.4.2.6

Notes on the Use of this Handbook
Safety Symbols
Indications
Symbols of Vacuum Technology
Definiton of Terms
Support from INFICON Service
Introduction
PurposeTechnical Data
Physical Data
Electrical Data
Other Data
Ambient Conditions
UnpackingSupplied Equipment
Accessories and Options
Sniffer line SL200
ToolboxHelium Bottle Holder
ESD Mat
RC1000WL Remote control
Test chamber TC1000

7
7
8
8
8
10
12
12
14
14
15
15
15
15
16
16
17
17
17
17
17
18

2

Installation

20

2.1
2.2
2.3
2.3.1
2.3.2
2.3.2.1
2.3.2.2
2.3.2.3
2.3.2.4
2.3.2.5
2.3.2.6
2.4
2.4.1
2.4.2
2.4.3
2.4.4

20
22
24
24
26
27
27
28
30
30
30
31
31
31
31

2.5

Transportation
Working Location
Electrical Connections
Mains Power
Connections for the Data Acquisition Systems
Accessories
Digital Out
Digital In
RecorderRS232
Remote Control
Vaccum Connections
Inlet Port
Exhaust
Vent
Purge-connection (UL1000 Fab) /Gas ballast (UL1000) 31
Default parameters

3First Operation Check

33

3.1

Needed Equipment

33

Table of Contents

32

3

4

4

Description and Working Principle

37

4.1
4.2
4.2.1
4.2.2
4.2.2.1
4.2.2.2
4.2.2.3
4.2.2.4
4.2.2.5
4.2.2.6
4.2.2.7
4.3
4.3.1
4.3.2
4.3.3

Introduction
Components of the UL1000 and UL1000 FabVacuum System
Control PanelLC Display
START Button
STOP Button
ZERO Button
MENU Button
Soft Keys
Numerical Entries
Working Modes
Vacuum Mode
Sniffer Mode
Auto Leak Test Mode

37
37
38
39
40
40
40
40
41
41
42
43
43
44
45

5

Operation of the UL1000 and UL1000 Fab

46

5.1
5.2
5.3
5.3.1
5.4
5.4.1
5.4.2
5.4.3
5.4.4
5.4.5

Display
The Screen in Run-Up Mode
Display in Standby mode
Purging
The Screen in Measurement Mode
Call for Calibration
Speaker Volume
Status Line in the Display
Numerical Display Mode
Trend Mode

46
46
47
47
47
47
48
48
49
49

6

Description of the Menu

50

6.1
6.2
6.2.1
6.2.2
6.2.3
6.2.4
6.2.5
6.2.6
6.2.7
6.3
6.3.1
6.4
6.4.1
6.4.2

Main Menu
View
Scale linear/logarithmic
Display-range auto/manual
Time axis
Contrast
Background in Stand by
Decimal places
Lower display limit
Mode
Auto Leak Test
Trigger & Alarms
Trigger Level 1
Trigger Level 2

50
52
53
53
54
54
55
55
56
56
57
59
59
60

Table of Contents

Operating Manual

33
33
36
36

(2202)

Description of the Initial Operation
Start up and Measure
Internal Calibration
Verification

iina70en content.fm

3.2
3.2.1
3.2.2
3.2.3

Operating Manual(2202)
iina70en content.fm

6.4.3
6.4.4
6.4.5
6.4.6
6.4.6.1
6.4.6.2
6.4.6.3
6.4.6.4
6.5
6.6
6.6.1
6.6.1.1
6.6.1.2
6.6.1.3
6.6.1.4
6.6.1.5
6.6.1.6
6.6.2
6.6.2.1
6.6.2.2
6.6.3
6.6.4
6.6.4.1
6.6.4.2
6.6.4.3
6.6.4.4
6.6.5
6.6.5.1
6.6.5.2
6.6.5.3
6.6.5.4
6.6.5.5
6.6.5.6
6.6.6
6.6.6.1
6.6.6.2
6.6.7
6.7
6.7.1
6.8
6.8.1
6.8.2
6.8.3
6.8.4

VolumeUnits
Alarm delay
Audio alarm type
Pinpoint
Leak rate prop.
Setpoint
Trigger alarm
Calibration
Settings
Vacuum settings
Automatic purge (UL1000 Fab only)
Vent delay
Vacuum ranges
Leak rate internal test leak
Machine factor
Auto Leak Test adjustments
Zero & Background
Background Suppression
Zero
Mass
Interfaces
Control Location
RS232 Protocol
Recorder output
Scaling Recorder Output
Miscellaneous
Time&Date
Language
Leak rate filter
Mains Frequency
Service interval exhaust filter
Service message exhaust filter
Parameter save / load
Load parameter set
Save parameter set
Monitoring functions
Information
Service
Access Control
Access to CAL function
Access to Trigger&Alarme menu
Change Device PIN
Change Menu-PIN

60
61
61
62
62
62
63
63
63
64
65
65
65
66
67
67
67
71
71
71
72
72
73
74
75
76
77
77
77
78
78
78
79
79
79
80
80
83
83
84
84
85
85
85

7

Calibration

86

7.1
7.2
7.2.1
7.2.1.1

Introduction
The calibration routines
Internal Calibration
Automatic Internal Calibration

86
86
87
87

Table of Contents

5

87
87
91

8

Error And Warning Messages

92

8.1
8.2

Hints
List of Errors & Warnings

92
93

9

Maintenance Work

98

9.1
9.2
9.3
9.4
9.5
9.5.1
9.5.2
9.5.3
9.6
9.7
9.8
9.8.1
9.9
9.10
9.11

General Information
98
Send in device for maintenance, repair or disposal
99
Key to the Maintenance Plan
99
Maintenance Plan
100
Maintenance Groups
101
Notes refering the maintenance of the SplitFlow 80
101
Description of the Maintenance Work101
Opening the Instrument for Maintenance Purposes
101
Checking and Replacing the Filter Insert
102
Replacing the Exhaust Silencer
104
Checking/Emptying the Exhaust Filter
105
Replacing the Filter Insert
105
Monitoring the Oil Level of the D16 B and Topping up the Oil 107
Oil Change for the D16B
108
Scroll Pumps (UL1000 and UL1000 Fab only)
11010Declaration of Conformity

111

A

Diagram

112

Index

114

Operating Manual

Manual Internal Calibration
External Calibration
Factor of Calibration - Range of Values

iina70en content.fm(2202)

7.2.1.2
7.2.2
7.3

6

Table of Contents

1

General Information
Notice:We recommend that you carefully read this technical handbook to ensure
optimum operating conditions right from the start.

technical handbook

This technical handbook contains important informations on the functions,installation, start-up and operation of the UL1000 and UL1000 Fab.
GeneralWe reserve the right to modify the design and the specified data. The illustrations are
not binding.

1.1

Notes on the Use of this Handbook

1.1.1

Safety Symbols
Important remarks concerning operational safety and protection are emphasised asfollows:

CautionInformation on correct handling or use. Disregard can lead to malfunctions or minor
equipment damage.

Warning
Information on preventing extensive equipment and environmental damage.

STOP

Danger(2202)

Information on preventing any kind of physical injury.

Skilled personnel

iina70en 01.fm

Indicates procedures that must be performed by skilled personnel only.

General Information

7

Indications
Tip

Information on helpful procedures.

Notice:Information on special technical requirements that the user must comply
with.

The references to diagrams consists of the chapter number, figure number and theitem number in this order. For example: Fig. 2-4/7 refers to item 7 in the figure 4 ofchapter 2.

1.1.3

technical handbook

1.1.2

Symbols of Vacuum Technology
Given in the following are some important vacuum symbols which are used in thismanual.
Vacuum pump in general
Turbomolecular pump
Measuring instrument
Valve

1.1.4

Definiton of Terms
Autoranging
The autoranging feature of the UL1000 and UL1000 Fab covers the entire range orleak rates depending on the selected operating mode. Not only the leak rate signal,
but also the pressure in the test sample (inlet pressure P1) and the forevacuum
pressure (P2) are used for control purposes. Range switching between the main
ranges is performed via valves. Fine range switching within the main ranges is
implemented by switching over the gain factor of the preamplifier.

(2202)The range of the preamplifier and the vacuum ranges are selected automatically.

Autotune
Mass alignment

iina70en 01.fm

This function automatically aligns the mass spectrometer so that a maximum leakrate is displayed. The control processor changes the voltage which erates the ionsin the selected mass range until a maximum ion current is detected by the ion
detector. During each calibration the mass alignment is run automatically.

8

General Information

Auto zeroMeasurement and automatic adaptation to the helium background.

technical handbook

This function determines the internal ZERO level of the unit which is then deductedfrom the currently measured leak rate signal. This function is enabled by pressing
the Start key provided the UL1000 or UL1000 Fab have run at least 20 s in "Standby"
mode or in "Ventilation" mode.
If the before suppressed helium background further decreases and only the display
limit appears, the ZERO-level will be adjusted automatically
Menu
The menu allows the user to program the UL1000 and UL1000 Fab according to his
requirements. The menu has a tree architecture.
Default
Status of the UL1000 and UL1000 Fab when supplied by the factory.
GROSS
GROSS is a measurement mode which allows high inlet pressure (1 to 15 mbar).
The smallest detectable leak rate is 1x10-6 mbar l/s.
FINE
FINE is the medium measurement mode with inlet pressure between 2 and 0,4 mbar.
Detection limit is 1x10-10 mbar l/s.
ULTRA
ULTRA is the most sensitive measuring range with inlet pressures below 0,4 mbar.
The minimum detectable leak rate is 5x10-12 mbar l/s.
Foreline pressure
Pressure in the foreline between Turbo pump and scroll pump.

(2202)

Minimum detectable leak rate
The smallest leak rate the UL1000 and UL1000 Fab is able to detect( 5x10-12 mbar l/s).
Internal helium backgroundThe existing helium partial pressure in the measurement system. The level of theinternal helium background is measured in the Standby mode and subtracted fromthe measured signal.

iina70en 01.fm

Measure Measurement mode
The UL1000 and UL1000 Fab measures the leak rate of the test sample.

General Information9

Support from INFICON Service
If an instrument is returned to INFICON or an authorised representative of INFICON,
please indicate wether the instrument is free of substances damaging to healths orwether it is contaminated. If it is contaminated also indicate the nature of the hazard.
INFICON must return any appliances without a Declaration of Contamination to thesender’s address. A form for stating details as to the type of contamination isreproduced in Fig. 1-1.
A maintenance and service contract is recommended.
Please contact the manufacturer and send a completed declaration ofcontamination before sending anything to us. You will then receive a returnnumber and the shipping address.

•

Use the original packaging when returning.

•

Before sending the device, attach a copy of the completed contamination
declaration.

iina70en 01.fm(2202)•

technical handbook

1.2

10

General Information

technical handbook.

Declaration of Contamination
The service, repair, and/or disposal of vacuum equipment and components will only be carried out if a correctly completed declaration has
been submitted. Non-completion will result in delay.
This declaration may only be completed (in block letters) and signed by authorized and qualified staff.

Description of productReason for return

Type
Article Number
Serial Number

Operating fluid(s) used (Must be drained before shipping.)

Process related contamination of product:
toxic

no  1)

caustic

no  1)yes biological hazard
explosive

no 
no 

yes  2)yes  2)

radioactiveno 

yes  2)other harmful substances no  1)
The product is free of any substances which are damaging tohealthyes 1) or not containing any amountof hazardous residues thatexceed the permissible exposure limits

yes 

yes 
2) Products thus contaminated will not be accepted without written
evidence of decontamination!

Harmful substances, gases and/or by-products
Please list all substances, gases, and by-products which the product may have come into contact with:
Trade/p roduct name

Precautions associatedwith substanceChemical name(or symbol)

Action if human contact

Legally binding declaration:
I/we hereby declare that the information on this form is complete and accurate and that I/we will assume any further costs that may
arise. The contaminated product will be dispatched in accordance with the applicable regulations.

(2202)

O rganization/company
Address

Post code, place

Phone

Fax

Email
Name
Date and legally binding signatureThis form can be downloaded
from our website.

Company stamp

Copies:Original for addressee - 1 copy for accompanying documents - 1 copy for file of sender

INFICON GmbHiina70en 01.fm

Bonner Str. 498,50968 Cologne, Germany
Tel: +49 221 3474 2222 Fax: +49 221 3474 2221
www.inficon.com leakdetection.service@inficon.com

zisa01e1-aFig. 1-1: Declaration of Contamination form

General Information

11

Introduction

1.3.1

PurposeThe UL1000 and UL1000 Fab are helium leak detectors. These instruments may be
used to detect the location and the size of leaks on objects under test in two different
ways:•

when the test sample has been evacuated first and is sprayed with helium on theoutside. It is required that a vacuum connection is provided between the UL1000
and UL1000 Fab and the test sample (vacuum mode).

technical handbook

1.3

or
•

when a helium overpressure is provided in the test sample and the test sample issearched from the outside with a sniffer probe which is attached to the inlet port
(sniffer mode).

STOP

DangerCaution: Danger of explosion
Hydrogen forms a highly explosive gas mixture with air.
Great caution is necessary when using hydrogen! No smoking, no naked flames,
avoid sparks.

CautionThe UL1000/UL1000 Fab is only allowed to be used as a leak detector. It may not
be used as a pump system (especially not for pumping off aggressive or humid
gasses)Warning(2202)

This equipment is not intended for residential use and cannot provide adequate
protection for radio reception in such environments.

Cautioniina70en 01.fm

This equipment is not intended for residential use and cannot provide adequate
protection for radio reception in such environments.

12

General Information

For UL1000 use only:

technical handbook

Notice:Pumping condensable gases and steams: When pumping test sample
water vapour that is inside can attain to the fore pump. With the water vapor
that is in the air - especially in humid areas or when using humid or wet test
samples - the acceptable compatibility of water vapor or capacity of water
vapor respectively can be exceeded.

The steam in the oil of the pump condenses when the water vapor rises over theacceptable value. So the attribute of the oil changes and danger of corrosion occures
for the pump.
While using the leak detector with condensable gases and steams the oil of the forepump has to be controlled regularly. So you can recognize a condensation of water
vapor in the pump. Usually the oil is light and lucent. When water vapor is inside itgets blear and milky at operating state temperature.
When turning the pump off water vapor condensates and rases the part of water inthe oil.

STOP

DangerDangerous gases pollute the machine.
So you must not use the machine for detecting toxical, acidity, microbiological,
explosive, radioactive or other noxious matters.

Warning
The leak detector must not directly be switched off after the process, in whichcondensable gases or steams are pumped, is finished. It must be running (at least
20 minutes) with opend gas ballast valve (see Chapter 5.3.1) until the oil of thepump is free from detachted steams.
When not taking care of this instruction there can be a corrosion within the pump.
So damages will occure.

(2202)The height of the oil of the pump has to be controlled regularly.
The normal intervalls of changing the oil from the producer have to be taken careof. See instructions of the rotary vane pump.

Cautioniina70en 01.fm

Gases that contain halogen melecules (i.e. fluorine, chlorine), i.e. refrigerants andSF6, should not be pumped by the leak detector in higher contact rations and overa longer time period.
The coating layer of the cathodes (at the ion source) can be affected. This could
cause a burn out of the cathodes.

General Information

13

For UL1000 Fab use only:

Condensable gases and steams can attain the inside of the leak detector anddestruct the fore pump.
With the water vapor that is in the air - especially in humid areas or when using
humid or wet test samples - the acceptable compatibility of water vapor or capacityof water vapor respectively can be exceeded.

technical handbook

CautionIf you plan to detect noxious matters please contact the manufacturer. Rules fordecontamination will be developed then. If the leak detector alreay has been incontact with dangerous gases please fill the declaration of contamination, too, andsend it to INFICON before you send the parts.

1.3.2

Technical Data

1.3.2.1

Physical Data
Max. inlet pressure

15 mbar

Minimum detectable Helium leak rates
in vacuum mode (ULTRA)<5×10-12 mbar l/s

limit of detection in sniffer mode

<5×10-8 mbar l/s

Maximum displayable helium leak rate in ULTRA

0.1 mbar l/s

Measurement range

12 decades

Time constant of the leak rate signal (blanked off,
63% of the final value)<1 s

Pre-vacuum suction capacity (air)25 m3/h (50 Hz)
17.6 cfm (50 Hz)•

30 m3/h (60 Hz)
21.1 cfm (60 Hz)
Max. pumping speed (helium) at inlet– GROSS mode

8 l/s 1)

– FINE mode

7 l/s 1)– ULTRA mode

2.5 l/s

Detectable masses

2, 3 and 4

Mass spectrometer

180° magnetic sector field

Ion source

2 filaments;
Iridium/Yttria-oxide

Inlet port

DN 25 KF

Run-up time (after starting)3 min

1) Assumption of laminar flow for the GROSS and FINE pressure ranges, for which the helium
pumping speed is equal to the air pumping speed.

14

General Information(2202)

in vacuum mode

iina70en 01.fm•

technical handbook

Notice1.3.2.2

To get down to the minimum detected leak rate range some conditions
must be fulfilled:•

UL1000 and UL1000 Fab has fully warmed up•

Ambient conditions must be stable (temperature, no vibration/accelerations.)•

The part under test has been evacuated long enough (background is no longer
decreasing)•ZERO must be active

Electrical Data
Part no. 550 - 000A, 550 - 100A

230 V 50 Hz

Part no. 550 - 001A, 550 - 101A

115 V 60 Hz

Part no. 550 - 002A

100 V 50/60 Hz

Power consumption

1100 VA

Mains connection cable (country-specific)

1.3.2.3

1.3.2.4

Other Data
Valvessolenoid

Dimensions (L × W × H) incl. handle in mm

1068 × 525 × 850

Dimensions (L × W × H) incl. handle in inches

42 × 21 × 33

Weight in kg

110

Weight in lbs

242

Noise level dB (A)< 70

Noise level dB (A) 0.5m distance< 56

Audio alarm dB (A)90

Pollution degree2

Overvoltage category

II

Ambient Conditions(2202)For use within buildings
Permissible ambient temperature (during operation)+10 °C … +40 °C

Permissible storage temperature

0 °C … +60 °C

Max. rel. humidity

80% non condensing

Max. permissible height above sea level (during operation) 2000 m

1.4

Unpackingiina70en 01.fm

Unpack the UL1000 and UL1000 Fab immediately after delivery, even if it will be
installed later on.
Examine the shipping container for any external damage. Completely remove thepackaging materials.

General Information15

If any damage is discovered, report it immediately to the forwarding agent andinsurer. If the damaged part has to be replaced, please contact the orders
department.

1.4.2

Before starting up make sure that the transportation fixing is loosened.
(Please refer to chapter 2.1)

Tipp

Retain the packaging materials in the event of complaints about damage.

Tipp

For unpacking please use the wedge which is part of the packaging.

Supplied Equipment•

Helium Leak Detector UL1000 or UL1000 Fab

1•Exhaust hose adapter with clamps

1•

Mains connection cable (country-specific)

1•

power cord fixture

1•

cable ties

1•

Set of fuses

1•

Set of tools

1•

Wedge to open the device

1•

Bellow Clips (2 + 2)

1•

hooks to wrap power cord (with screws)

1•

Tool to open the UL1000 and UL1000 Fab

1•

O-Ring with filter (for use at applications with particles

1•

Folder with documents– Technical Handbook UL1000 and UL1000 Fab

1– Spare Parts List UL1000 and UL1000 Fab

1Accessories and Options

16(2202)

The following parts can be ordered additionally:•

Sniffer Line SL200

14005

•

Leak Ware

14090

•

Helium Sniffer QUICK-TEST QT100

15594

•

Tool Box (detachable)

551-000•

Helium Bottle Holder

551-001•

ESD Mat551-002•

RC1000 Remote control

General Information– RC1000WL wireless version

551-015– RC1000C cable version

551-010– Extension Cable, 8 m

14022

iina70en 01.fm

1.4.1

Notice:technical handbook

Check if the UL1000 and UL1000 Fab is complete (See Chapter 1.4.1) and carefully
examine the leak detector visually.

technical handbook

1.4.2.1•

Test chamber TC1000

551-005•

spray gun with hose

16555

•

set of plugs•

LeakWare (software package)

20099024
14090

Sniffer line SL200
By use of the sniffer line the UL1000 and UL1000 Fab can easily be converted to asniffer leak detector. The length of the sniffer line is 3m, 5m or 10m.

1.4.2.2

Toolbox
The toolbox is a detachable compartment with a lockable lid. Fittings and small
fixtures can be stored plus the hand set (Please refer to Chapter 1.4.2.5). The
storage volume is approximately 5 l.
The toolbox is placed on the working surface and jammed by the handle.

1.4.2.3

Helium Bottle Holder
The helium bottle holder allows you to carry a helium reservoir and a spray gun with
the UL1000 and UL1000 Fab. Only small and midsize bottles (max 10 l, 200 bar) will
fit without influencing the stability of the UL1000 and UL1000 Fab.

1.4.2.4

ESD MatThis mat is put on the working surface of the UL1000 and UL1000 Fab and isclamped and grounded by the inlet port ring. It avoids electrical discharges between
the working surface and sensitive test parts.

1.4.2.5

RC1000WL Remote control(2202)The RC1000WL is a wireless remote control that allows to operate the UL1000 and
UL1000 Fab from distance up to 100 m. It provides the functions START, STOP/
VENT, ZERO and speaker volume, and displays leak rate in bargaraph or in chartmode. (see also Technical Handbook RC1000WL.)
Measured values can be stored in an internal memory for up to 24 hours of recording
time. The data can easily be downloaded to a USB stick to save it.
An internal trigger can be set to provide a warning if the limit leak rates are exceeded.
An optical warning is shown on the display and an acoustic warning signal issounded on the integrated loudspeaker or the connected headphones.
The RC1000WL remote control is housed in a robust housing to enable ergonomic
working. Magnets on the underside of the unit enable it to be attached to horizontal
or vertical metal surfaces.

iina70en 01.fm

The RC1000WL also enables remote operation of the leak test device in question
using a connection cable of up to 28 metres in length.

General Information17

technical handbook

Fig. 1-2 RC1000WL wireless remote control

1.4.2.6

Test chamber TC1000
This test chamber turns the UL1000 / UL1000 Fab into a workstation to test
hermetically sealed components.

Fig. 1-3 Test chamber TC1000

18

General Information

iina70en 01.fm(2202)

Testing according to MIL-STD 883 can be done easily, fast and accurate. The test
starts automatically when the chamber lid is closed, test parameters like cycle timeand rejectant level can be setted in the menu Auto Leak Test (see 6.6.1.6). The test
cycle runs automatically, the test result is also displayed by red / green LEDs directlyat the chamber.

General Information

19

iina70en 01.fm(2202)

technical handbook

Installation

2.1

Transportation
CautionThe UL1000 and UL1000 Fab is not equipped with any crane eyes and must
therefore not be transported using lifting equipment.

technical handbook

2

CautionWhen transporting over longer distances the original packaging must be used. The
castors must not be fixed when the UL1000 and UL1000 Fab is shipped in a crate.
UL1000 Fab with Triscroll TS 620
For transportation the chassis plate where the pump is mounted on has to be
secured by a transportation fixing.
This transportation fixing consists of 2 screws at chassis of the UL1000 Fab (one oneach side).
To get access to these screws remove the side covers of the UL1000 Fab.

Fig. 2-1

20

Installation

iina70en 02.fm(2202)

There are orange labels on the bottom part pointing to the screws:

For transportation fixing the screws are tightened to the chassis plate. For operationof the UL1000 Fab the screws should be loosened.

technical handbook

To loosen the screws first loosen the counter nut that is accessible from underneath:Fig. 2-2

iina70en 02.fm(2202)

Loosen the screws approximately 10 mm above the chassis plate and tighten thenthe counter nuts again:

Installation21

technical handbook

Fig. 2-3
For transportation tighten the screws again and fix them by the counter nuts.

2.2

Working Location
Move the UL1000 and UL1000 Fab to the desired position and arrest the castors.

DangerCaution: Exhaust gases and fumes:
Exhaust gases and fumes from oil-sealed pumps may be harmful to health.
For operation in poorly ventilated rooms, an exhaust pipe should be connected toexhaust connection 5 depending on the application and gases used.

(2202)

STOP

Warningiina70en 02.fm

The UL1000 and UL1000 Fab must not be operated while standing in water orwhen exposed to drip water. The same applies to all other kinds of liquids.

22

Installation

technical handbook

Warning
Avoid contact with bases, acids or solvents as well as exposure to extreme climaticconditions.

Warning
The UL1000 and UL1000 Fab is designed for indoor use only.

CautionMake sure that you can always reach the mains plug.

CautionEnsure a sufficient air cooling. The air inlet as well the air discharge openings mustnever be obstructed.

CautionThe UL1000 and UL1000 Fab can be locked by arresting the castors of the front
wheels to avoid movements on skewness.

iina70en 02.fm(2202)

It is recommended that you check all major helium sources in the vicinity of the
UL1000 and UL1000 Fab within a radius of about 10 m for the presence of any big
leaks. You may use the sniffer probe for this.

Installation23

Electrical Connections

2.3.1

Mains Power
Notice:Generally the local regulations for electrical connections must be observed.

Warningtechnical handbook

2.3

Before connecting the UL1000 and UL1000 Fab to the mains you must make surethat the mains voltage rating of the UL1000 and UL1000 Fab coincides with thelocally available mains voltage. The instrument must exclusively be connected to asingle phase supply with fuses for installation (Circuit breaker 16A max. according
to IEC/EN 60898-1 with tripping characteristic B).
The mains voltage rating for the UL1000 and UL1000 Fab can be read off from thename plate beneath the mains socket Fig. 2-6/7 at the back side.
This voltage is fixed and can not be changed.

STOP

DangerDanger due to electric shock
Improperly grounded or fused products may be dangerous to life in case of a fault.
The use of the device is not permitted without a connected protective ground
conductor.
- Only use the included 3-wire power cable.
- In regions with 100 to 120 V power supply using plug type NEMA 5-15 (e.g. North
and Central America, Taiwan and Japan), only the supplied "Hospital-Grade"
power cord must be used.
- If the cord is damaged, it must be replaced with an original "Hospital-Grade" cordspare part (INFICON p/n 200000587).

- Ensure that the appliance coupler (socket on the power switch) is always easily
accessible.

(2202)- Note that "Hospital-Grade" power cords are marked with the same wording and agreen dot as labeled on the NEMA 5-15 male power plug.

iina70en 02.fm- Immediately disconnect the device from the mains in case of visible defects. This
also applies to the development of smoke.

24

Installation

Warning
technical handbook

Pulling on the power cord may cause damage to the power outlet.
The power cord can be secured against accidental unplugging.
•

If someone intentionally or accidentally pulls the power cord•when the device is being moved around•or someone stumbles over the cable, the power outlet may be damaged.

Place the power cord so that no one can accidentally pull it or trip over it.

A separate fuse for each of the mains conductors has been integrated into the mains
switch.
The mains voltage is applied to the instrument via the detachable mains cable which
is supplied with the instrument. A mains socket Fig. 2-6/7 is available for this purposeat the back side of the instrument.
To prevent the mains cable from being accidentally disconnected, it can be fixed withthe mains cable fuse supplied.
The cable can be secured like shown in the following Figure.

(2202)

Notice:Fig. 2-4 secure fixture power cord
If the machine is not operating the cable can be stored at the cable holders.

iina70en 02.fm

Notice:Installation25

technical handbook

Fig. 2-5 storing power cord

2.3.2

Connections for the Data Acquisition Systems
1. Accessories
2. Digital Out
3. Digital In
4. Recorder
5. RS232
6. Remote Control /Wireless transmitter
7. Mains Socket
8. Mains Switch
9. Hole to mount cable hooks.
10. Speaker
12. Purge (UL1000 Fab) /Gas ballast (UL1000)(2202)

11. Vent

iina70en 02.fm

Fig. 2-6

26

Installation

technical handbook

Tip

The sockets: Accessories, Digital Out, Digital In and Recorder have pin 1
on top. The pin numbers are counted downwards. The socket 2 and 3 arecoded mechanically to avoid a confusion with the counter plug. For theconnection with the counter plug (set of plugs 20099024) remove theplastic pins at the plug, accordingly the plug fits the socket.

Tip

The connections for external devices are safely seperated from the mains
and safe low voltage.

CautionJust connect devices that don’t excess 60V DC, 25V AC.

2.3.2.1

Accessories
The following accessories may be connected to the sniffer line SL200 (Please refer
to Chapter Fig. 2-6/1) or the test chamber TC1000:
Contact pins 1 and 3 are fused with a 0.8 A slow-blow fuse. The amount of power
which can be drawn is limited to 10 W. The contacts are numbered from top tobottom.
Pin
1
2
3, 6
4, 5, 7, 8

2.3.2.2

Assignment+24 V, constantly applied, power supply for the sniffer line SL200.
GND24
Input
OutputDigital Out

iina70en 02.fm(2202)

The following relay outputs are available for further signal processing. The maximum
rating for the relay contacts is 25 V AC and 1 A.
Pin
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16

Assignment+24V, bridged with pin 1 of socket „Digital In“
GND_24V
Trigger 1
Trigger 2
Free
Zero active
Ready
CAL active
Cal request
Error
Warning
Purge
MeasureRecorder Strobe
Common dig. out
FreeInstallation

27

Description of the operation mode of the Digital Out.

Trigger 2:
Is open in case Trigger Level 2 is exceeded or the machine is not in condition of
measuring.
Zero active:
Is closed in case Zero function is running.

technical handbook

Trigger 1:
Is open in case Trigger Level 1 is exceeded or the machine is not in condition of
measuring.

Ready:Is closed in case machine is ready for measurement (Emission on, no error).
CAL active
Closed when machine is in calibrating routine.
CAL Request
Is opend in case of calibration request. During external calibration a open output
indicates that the external calibrated leak has to be closed.
Error
Open when an error is shown.
Warning
Open when a warning is shown.
Purge
Closed when purge is active.
MeasureClosed in case a machine is in measure mode.
Recorder Strobe
Closed in case recorder output is invalid. Only used when record output is set on„leak rate“.
Notice:2.3.2.3

Functionality of the relays is not supervised by the system (no error
message will be displayed). In particular for critical, frequent or long termuse, application of supervision procedures are recommended.

Digital In

iina70en 02.fm(2202)

These inputs can be used to control the UL1000 and UL1000 Fab with aprogrammable logic control (PLC).

28

Installation

technical handbook

Pin
1
2
3
4
5
6
7
8
9
10
11
12
13
14
15
16

Assignment+24V, bridged with pin 1 of socket „Digital Out“
GND_24V
Start
Stop
Zero
CAL
Clear
Purge
Free
Free
Common dig
Free
Free
Free
Free
Free

Description of operation mode of the Digital In.
Zero:
Change from low to high: activate zero
Change from high to low: deactivate zeroStart:
Change from low to high: activate START
Stop:
Change from low to high: activate STOP
When this inlet is longer high than anounced in chapter 6.6.1.2 then ventilate it
additionaly.
Purge:
Change from low to high: activate purge
Change from high to low: deactivate purge(2202)

Clear:
Change from low to high: confirm error message
CAL:
Change from low to high:When machine is in standby mode: start internal calibration. In case machine ismeasurement mode: start external calibration. (Premise: external calibration test
leak has to be open and leak rate signal is stable)
Change from high to low:
External calibration: approve that external test leak is closed and leak rate signal isstable.
High means: U > 13 V(approximately 7mA)
Low means: U < 7 V
The level of the logic signals must not exceed 35V.
Signals at these inputs are only accepted if the location of control is set to„PLC“ or „Local and PLC“. Refer to Chapter 6.6.4.1

iina70en 02.fm

Notice:Installation29

2.3.2.4

RecorderThe measured values are provided by way of an analogue signal in the range of 0 V… 10 V. The resolution is limited to 10 mV. The reference potential (GND) isavailable at pins 2 and 3. The contacts are numbered from top to bottom.
Tip

A diagramm showing pressures and leakrate versus voltage is attached in
the appendix.

Notice:

The chart recorder outputs are electrically isolated from other plugs. If, inspite of this, hum interference is apparent it is recommended to operate the
UL1000 and UL1000 Fab and the chart recorder from the same mains
phase. If this is not possible, you must make sure that the frame ground ofboth instruments is kept at the same potential.

Pin
1
2
3
4

2.3.2.5

technical handbook

The recorder output see Fig. 2-6/4 may be used to log the leak rate, the inlet pressure
and the forevacuum pressure.

Assignment
Analog 1
GND
GND
Analog 2

RS232
This RS232 C interface Fig. 2-6/5 is wired as data communication equipment (DCE)and permits the connection of a personal computer (PC) for monitoring and data
logging. The connection is made through a 9 pin sub-D socket. For more informationrefer to the Interface Description.
Pin
2
3
5
7
8

Remote Control
This Remote Control interface Fig. 2-6/6 is a serial interface to control the UL1000
and UL1000 Fab by the RC1000. The RC1000 Remote Control can be connected via
the wireless transmitter or via an extension cable with a RJ45 plug. Refer to theRC1000 Technical Handbook for more information.
Assignment+24V (fuse 0.8 A time lag)0V
RXD (intern. RS232)
TXD (intern. RS232)

iina70en 02.fm

Pin
2
3
4
5

(2202)

2.3.2.6

Assignment
RXD
TXD
GND
RTS
CTS

30

Installation

2.4

Vaccum Connections

2.4.1

Inlet Port

technical handbook

The inlet port is located on the top of the UL1000 and UL1000 Fab. The size of theflange is DN 25 KF.

Warning
Risk of injury due to sucking connection flange.
If the Vacuum-Mode of the UL1000 is activated, the connection flange may suckbodily parts around the connection flange. Keep bodily parts off the connection
flange.
A test object or a test chamber has to be connected to the inlet port if the vacuum
mode is chosen (See Chapter 6.3).
The inlet port is also used for the connection of the sniffer line.

2.4.2

ExhaustThe exhaust Fig. 2-6/12 flange is located underneath the UL1000 and UL1000 Fabat the back side. The size of the flange is DN 16 KF.

Warning
Depending on the chamber the UL1000 and UL1000 Fab is attached to and the gas
inside the chamber lethal gases can be spoiled into the air through the exhaust.
When shipped only the exhaust filter body is preassembled. The filter cartridge is
supplied together with the leak detector and can be installed at the exhaust.
Instead of this an exhaust line can be connected to the exhaust by the exhaust
adapter.

2.4.3(2202)

Usually the parts under test are vented with ambient air when the test is finished. If
it is required the parts can be vented with a different gas (i. e. fresh air, dry air,nitrogen, …) at max. 1050 mbar pressure. In this case a vent hose has to beconnected to the hose coupling Fig. 2-6/10.

2.4.4

iina70en 02.fm

Vent

Purge-connection (UL1000 Fab) /Gas ballast (UL1000)
For purge modes it is recommended to use Helium-free gases at atmosphericpressure. Ambient air can be contaminated with Helium due to spraying or charging.
In this case a gas supply line (i. e. nitrogen, fresh air, …) should be connected to thehose coupling. The pressure of these gas line must not exceed 1050 mbar.
The connector 11 and 12 are quick connectors for hose diameters of 8/6 mm.

Installation

31

2.5

Default parameters

On

Scalinglogarithmic

Display range:

4 decades

Time axis:

32 seconds

LCD invers:

OFF

Background in stand by mode:

OFF

Automatic calibration request:

OFF

Mass:

4 (helium)

Recorder Output:

leak rate

Volume:2

Leak rate unit:

mbar l/s

Mode:

VacuumTrigger level 1:

1E-9 mbar l/s

Trigger level 2:

1E-8 mbar l/s

Leak rate external test leak (Vacuum):

1E-7 mbar l/s

Leak rate external test leak (Sniffer):

1E-5 mbar l/s

Vent delay:

2 seconds

Automatic purge:

On

Pressure unit:

mbar

Minimum volume:

0

Beep:

On

Maximum evacuation time:

30 minutes

Audio Alarm Typ:

Trigger Alarm

Maximum inlet pressure when sniffing:

1 mbar

Minimum Inlet pressure when sniffing:

0,1 mbar

Number of decimal place at leak rate displayed:

1

Scroll display:On

Particle protection:

Off

Direct access to calibration:

On

Contamination protection:

Off

Switch off limit for contamination protection:

1E-3 mbar l/s

Control location:

Local
30 seconds

Leak rate filter:

I•Cal

Zero:

enablediina70en 02.fm

Alarm delay:(2202)

Auto-scaling:technical handbook

The following parameters are set like shown when in the menu of the UL1000 and
UL1000 Fab under Settings  Parameters load/save, „load default values“ ischosen.

32

Installation

3

First Operation Checktechnical handbook

The steps for an initial operation are described in this chapter. It is explained how toswitch on the UL1000 and UL1000 Fab, how to measure and how to carry out aninternal calibration.
Notice:3.1

If anything unexpected happens during the initial operation or the leakdetector acts in a strange way the UL1000 and UL1000 Fab can beswitched off by the mains switch at any time.

Needed Equipment
The following parts will be needed:

3.2•

A blind flange 25 KF (if not preassembled at the inlet port).

•

A helium test leak with a DN 25 KF adapter (optional).

Description of the Initial Operation
Please proceed the following description step by step to start the initial operation.
Refer to Chapter 5 Operation of the UL1000 and UL1000 Fab for a more detailed
description.

3.2.1

Start up and Measure
1 Unpack the UL1000 and UL1000 Fab and inspect it for any external damage (Refer
to Chapter 1.4 Unpacking).

2 Connect the instrument to the mains power (Refer to Chapter 2.3.1 Mains Power).
3 Switch on the leak detector by using the mains switch Fig. 2-6/8.

(2202)

Warning
Caution: Abrupt movements.
Abrupt movements can damage the running turbo pump.
Avoid abrupt movement and vibration of the instrument (e.g. running over cables,
door sills) during operation and up to 4 minutes after switching off since the turbo
pump can be damaged.

Cautioniina70en 03.fm

Don’t switch the UL1000 and UL1000 Fab on when ambient temperature is below
10°C.

First Operation Check

33

The start up procedure takes about 3 minutes and the end is indicated by a beep.
The UL1000 and UL1000 Fab is in Standby mode now.

technical handbook

After power on a welcoming picture appears on the screen of the control panel Fig.
3-1/1, then status information on the speed of the turbo pump, the foreline pressure,the emission and the active filament are given.

Fig. 3-1: Top view of the Standards
Pos. Description

Pos. Description

1

2

Control Panel

Inlet Port

4 Check if the inlet port Fig. 3-1/2 is blanked off. If not, please mount a blind flange with
5 Press the START Button Fig. 3-2/6. The inlet will be evacuated and the measured
leak rate will be displayed a moment later.

(2202)

O-Ring on the inlet port.

iina70en 03.fm

This is the measurement mode. If a test part was connected you would start spraying
Helium to identify leaks.

34

First Operation Checktechnical handbook

Fig. 3-2: Control Panel
Pos. Description

Pos. Description

1

LC Display

8

Soft Key no. 5

2

Soft Key no. 1

9Soft Key no. 6

3

Soft Key no. 2

10

Soft Key no. 7

4

Soft Key no. 3

11

Soft Key no. 8

5

Soft Key no. 4

12

MENU Button

6

START Button

13

STOP Button

7

Control Panel

14

ZERO Button

6 To correct for any background signal (residual Helium in the part under test) you may(2202)

press the ZERO Button Fig. 3-2/14. To undo ZERO please press the ZERO Button
for 2 … 3 seconds.

7 Press the STOP Button Fig. 3-2/13, the Standards will go to Standby. If you press
STOP a few seconds the inlet of the Standards will be vented.

8 To finish the startup procedure please proceed with #16. For calibration proceed withiina70en 03.fm#9.

First Operation Check35

3.2.2

Internal Calibration
9 Proceed the internal calibration (Please refer to Chapter 7.2.1 Internal Calibration).
•

Press Calibration (Soft Key no. 5 Fig. 3-2/8) to get into the calibration menu.

•

Select internal (Soft Key no. 4 Fig. 3-2/5) to choose the internal calibration.

•

Select automatic (Soft Key no. 8 Fig. 3-2/11). The automatic procedure of theinternal calibration is started and takes about 30 seconds.

technical handbook

For better quantitative measurements please allow the unit to warm up (15 … 20
minutes).

10 Press the STOP Button Fig. 3-2/13 until the message STANDBY / VENTED appearson the display. The inlet is vented now.

3.2.3

Verification
To verify the accuracy please proceed through the following steps. A test leak isrequired. If a test leak is not available please continue with #16.

11 Remove the blind flange from the inlet port and connect the open helium test leak to
the inlet port.

12 Press the START Button Fig. 3-2/6 again. The inlet will be evacuated and the leakrate of the test leak will be measured and displayed.

13 Press the STOP Button Fig. 3-2/13 to interrupt the measurement. The Standby mode
will be displayed.

14 Press the STOP Button Fig. 3-2/13 again until the message STANDBY vented
appears an the display. The inlet is vented now.

15 Remove the helium test leak from the inlet port and put a blind flange onto the inlet
port again.

16 Switch off the leakdetector by using the mains switch Fig. 2-6/8.

iina70en 03.fm(2202)

The first operation is finished.

36

First Operation CheckDescription and Working Principle

4.1

Introduction

technical handbook

4

The UL1000 and UL1000 Fab basically is a helium leak detector for vacuum
applications, i.e. the part under test is evacuated while the test is performed. The
vacuum is achieved with a pumping system that is part of the UL1000 and UL1000
Fab. In addition the vacuum can be generated by pumps with are set up in parallelto the leak detector.
Another operating mode of the UL1000 and UL1000 Fab is the Sniff mode which can
only be used when a sniffer line (See Chapter 1.4.2 Accessories and Options) ishooked up.

4.2

Components of the UL1000 and UL1000 Fabiina70en 04.fm(2202)The UL1000 and UL1000 Fab is a self-contained unit in a metal housing on wheels.
This housing contains the entire vacuum system and the according power supplies.
On top of the unit is the inlet port and the display.

Description and Working Principle

37

4.2.1

Vacuum Systemtechnical handbook

The vacuum diagram below shows the major components inside the UL1000 and
UL1000 Fab:Fig. 4-1: Vacuum Diagramm UL1000 and UL1000 Fab
1

MS: Mass Spectrometer, Helium sensor (180° magnetic field mass
spectrometer)

2

Turbomolecular Pump (TMP, provides high vacumm conditions in the MS)

3

V1a … V8: Electromagnetic Valves to control the gas flows

4

Scroll pump (provides the foreline pressure for the TMP und pumps down theparts under test)

5

Inlet Port

(2202)

Pos. Description

Gas molecules getting into the mass spectrometer are ionized by the ion source.
These positively charged particles are accelerated into the magnetic field following acircular path, the radius of which depends on the mass-to-charge ratio of the ions.
Only helium ions can pass this filter and reach the ion collector where the stream of
the ions is measured as a electrical current.
For operation the mass spectrometer requires a vacuum level in the range of
1×10-4 mbar and lower. This pressure is provided by the turbomolecular pump which
in turn is backed up by a scroll pump.

38

Description and Working Principle

iina70en 04.fm

The mass spectrometer is mainly composed of the ion source, the magnetic
separator and the ion collector.

technical handbook

Besides maintaining the pressure in the mass spectrometer the pump system is used
to evacuate the test parts. It is made sure that the pressure in the mass spectrometer
is low enough under all circumstances. The valves V1a, V1b, V2, V4a, V4b control
the gas flows when measuring. Valves V5 (only UL1000), V6, and V8 are used tovent the system and the Turbo pump. Valve V7 opens and closes the internal test
leak during calibration.
With the pressure in the test part being lower than ambient pressure sprayed helium
can penetrate into the part in case of a leakage. As soon as the pressure conditions
allow it one of the valves to the TMP opens. Now Helium can penetrate into the mass
spectrometer contrary to the pumping direction of the TMP.
See Chapter 4.3 Working Modes for details.

4.2.2

Control Panel
The Control Panel Fig. 4-2/7 contains a liquid chrystal display (LC Display), theSTART, STOP, ZERO and MENU buttons and also eight Soft Keys for the different
menus and inputs.

(2202)

The control panel itself is rotable.

iina70en 04.fm

Fig. 4-2: Control Panel
Pos. Description

Pos. Description

1

LC Display

8

Soft Key no. 5

2

Soft Key no. 1

9Soft Key no. 6

3

Soft Key no. 2

10

Soft Key no. 7

4

Soft Key no. 3

11

Soft Key no. 8

5

Soft Key no. 4

12

MENU Button

6

START Button

13

STOP Button

7

Control Panel

14

ZERO Button

Description and Working Principle

39

4.2.2.1

LC Display

4.2.2.2

START Button
Pushing the START Button Fig. 4-2/6 enables the UL1000 and UL1000 Fab to start
the measure procedure. If the START button is pushed again in measurement mode,the maximum leak rate indicator („hold“ function) is acitvated. This indicator shows
the maximum leak rate since „START“. By pressing the START-button again the„hold“ function will be started.

4.2.2.3

technical handbook

The LC Display Fig. 4-2/1 is the communication interface to the operator. It displays
the leak rates, the status report of the machine, messages, warnings and errors.

STOP Button
Pushing the STOP Button Fig. 4-2/13 interupts the measure procedure. If the button
is pressed longer the inlet is vented according to the conditions defined in the menu
Vent delay. Please refer to chapter 6.6.1.2 Vent delay to select the time parametersof the venting.

4.2.2.4

ZERO Button
Pushing the ZERO Button Fig. 4-2/14 enables the zero mode.
When pressing ZERO the currently measured leak rate is taken as a backgroundsignal and is subtracted from all further measurements. As a result the displayed leakrate then is•

1×10-6

•

1×10

-10

•

1×10-12 in ULTRAin GROSSin FINETo reverse the ZERO function please keep the button pressed for about 3 seconds.
After pressing ZERO the decreasing background is fitted to the course automatically.
So it is possible to recognize leaks even when the signal is decreasing rapidly.

Fig. 4-3 decreasing background40

Description and Working Principle

iina70en 04.fm(2202)

Please also refer to the pictures below.

technical handbook

When the measurement signal declines below the saved underground value theunderground value will automatically be equated with the measurement signal. As
soon as the measurement signal is increasing again the saved decreasing value
remains constant. Increasings of the signal are displayed clearly as a leak.

Fig. 4-4 undo ZERO
When you want to see the measurement signal (including underground) please press
the ZERO button about 3 seconds. The saved value will be reset to zero. The
underground signal will not be suppressed anymore.
Notice:4.2.2.5

The ZERO functions can be selected to a special mode that allows to use
it only when the signal of the falling background becomes stable (seeChapter 6.6.2.2).

MENU Button
When pressing the MENU button (Fig. 4-2/12) the selecting menu is shown at thedisplay. This function is not depending on the operating mode when calibrating.

(2202)

If the menu is opened during the current session the operator will lead to the lastscreen before the menu was left.
Pushing the MENU button again leads back to the screen of the previous working
mode. The software shows the last screen that was used before.

4.2.2.6

Soft Keys

iina70en 04.fm

The function of the eight Soft Keys Fig. 4-2/2 … /5 and /8 … /11 depends on thecurrent menu. Only key 1 and 8 very often have the functions Back/Cancel (Softkey
no. 1) and OK (Softkey no. 8.).
Special Functions
When inputs are allowed or when settings can be selected in a submenu two of theSoft Keys always have the same function:

Description and Working Principle

41•Soft Keys no. 1 Fig. 4-2/2 is Cancel.
It allows to escape from the submenu without any changes of the present settings
and return to the previous menu page.
Soft Keys no. 8 Fig. 4-2/11 is OK.
The selected settings or edited values will be stored and the previous menu page
will be displayed again.

4.2.2.7

Numerical Entries

technical handbook•

If you have opened a menu page where anumber can be changed please proceed
in the following way:•

If you don’t want to change anything, press Soft Key no. 1 Cancel.

•

The digit that can be changed is displayed inverted. With the arrows(Soft
Key no. 8) and(Soft Key no. 4) you can choose which digit you need tochange.

•To change a digit to a specific number press the corresponding pair of numbers.
A submenu opens and the desired number can be selected. The submenu closes
automatically and the next digit of the total number now is inverted.

Having reached the last digit all corrections have to be confirmed by OK (Soft Key
no. 8).
ExampleFig. 4-5: Numerical entry of the Trigger Level 1(2202)To change the trigger level 1.0x10-7 mbar l/s to 3x 10-7 mbar l/s please press 2/3(Soft Key no. 3) Fig. 4-5.

iina70en 04.fm

In the submenu press 3 (Soft Key no. 4) Fig. 4-6.

42

Description and Working Principle

technical handbook

4.3

Working Modes

4.3.1

Vacuum Mode
As mentioned (Please refer to Chapter 4.2.1 Vacuum System) the sample has to be
evacuated to allow Helium which is sprayed on the outside to enter through any leaks
due to the pressure difference.
When pressing the START Button Valves V1a and V1b open and the sample ispumped down by the roughing pump (UL1000) or scroll pump (UL1000 Fab). At thesame time valve V2 is closed to avoid an unacceptable pressure increase in the turbo
pump and the mass spectrometer. With valve V2 being closed the turbomolecularpump is operated without being backed up by the scroll pump. Since the mass
spectrometer is already under vacuum no further gas is pumped. Thus the pressure
p2 remains constant or increases only slowly.
If the pressure p2 even though increases (e.g because of a very long pumping down
process), then the evacuation will be broken (V1a and V1b closed) at p2 > 10 mbar
and V2 will open shortly to restore an appropriate foreline (p2 < 1 mbar).
The following diagrams show the gas flow during evacuation and during the modes
GROSS, FINE and ULTRA.

V1a

V1a
V5

MS

V5

MS

TL
V4b

V8

p2

V4a
V2

p1 V7
V6
V1b

V5

TL

p1 V7

V4b

V8

p2

V6

V4a
V2

V1b

V5

The condition for the evacuation process described is maintained until the inlet
pressure p1 has dropped below 15 mbar. Now valve V2 opens. Possibly present
helium may now flow upstream against the pumping direction of the turbo molecularpump into the mass spectrometer where it is detected. This mode is called GROSS,
the detection limit is 1×10-6 mbar l/s.

iina70en 04.fm(2202)

Fig. 4-6: left: Evacuation (no measurement), right: GROSS Mode

Description and Working Principle

43

V1a

V1a

MS

technical handbook

Since the scroll pump continues to evacuate the test sample the inlet pressure p1 willcontinue to drop. Below 2 mbar the UL1000 and UL1000 Fab will switch to FINE
mode, i.e. V4a will open and V1b will close. The gas stream enters the turbo pumpat an intermediate level. The sensitivity of the system now is higher, the detection
limit is 1×10-10 mbar l/s.

MS

TL
V4b

V8

p2

V4a
V2

p1 V7
V6
V1b

V5

TL
V4b

V8

p2

V4a
V2

p1 V7
V6
V1b

V5

Fig. 4-7: left: FINE Mode, right: ULTRA Mode
Now the lower part of the turbo pump further evacuates the sample and after thepressure p1 has reduced below 0.4 mbar the UL1000 and UL1000 Fab switches into
ULTRA mode, i.e. V1a and V4a close and V4b opens. The entrance into the turbo
pump is on a higher level now. The pumping speed at the inlet port is now 2.5 l/s, thedetection limit is 5×10-12 mbar l/s.
Tip

Sniffer ModeIn sniff mode a sniffer line (preferably the INFICON standard sniffer line 14005) isconnected to the inlet port. When pressing the START Button the system starts topump air through the sniffer line. Due to the constant gas flow through the sniffer line
the software will range directly into FINE mode and stay there. The inlet pressure will
not drop further down. By measuring the inlet pressure the system software makes
sure that the flow through the sniffer line is at the right level. Otherwise warning
messages are generated. The detection limit in sniff mode is <1×10-7 mbar l/s.

(2202)

4.3.2

A special set up of the UL1000 and UL1000 Fab stopps the autoranging
procedure as described above. With the mode FINE ONLY (Please refer to
Chapter 6.3 Mode) the unit will stay in FINE Mode Fig. 4-7 (left) regardlessthe inlet pressure. The valve V1a is closed.

iina70en 04.fm

INFICON’s sniffersystem QT100 may also be used to sniff. Since the QT100
provides a lower inlet pressure it is recommended to keep the system in vacuum
mode to avoid a wrong generation of pressure warnings. The machine factor has tobe adjusted to value 400.

44

Description and Working Principle

Auto Leak Test ModeIn this mode the test of hermetically sealed testing objects can be performed
automatically. By use of the optional test chamber TC1000 this test mode starts
automatically when closing the chamber lid. Fast test results within seconds areachieved by using the internal test leak of the UL1000 or UL1000 Fab for a dynamic
calibration, matched to the required test cycle. Leak rates in the 10-9 mbar l/s range
can be detected within 5 seconds.

iina70en 04.fm(2202)

technical handbook

4.3.3

Description and Working Principle

45

Operation of the UL1000 and UL1000 Fab
The UL1000 and UL1000 Fab is switched on by pushing the mains switch (Pleaserefer to Chapter 3.2.1 Start up and Measure). After less than 3 minutes, the start up
is completed; the leak detector is then ready to be used for measurements (Standby
mode).
Please connect the part to be tested to the inlet port and press START. The UL1000
and UL1000 Fab starts to evacuate the part. The evacuation time depends on thevolume of the test part. During evacuation the screen shows the inlet pressure online.

technical handbook

5

Once the pressure of 15 mbar (11 Torr or 1500 Pa) is reached the unit switches tomeasurement mode. The corresponding leak rate is displayed. For further
explanations of the screen please refer to Fig. 5-1.
The displayed leak rate corresponds to the helium background concentration in thepart under test. Since the UL1000 and UL1000 Fab continues to pump down the part
this background leak rate will further reduce. As soon as the leak rate is low enoughin respect to your requirements you may start spraying Helium to search for possible
leaks.
When you are finished please press STOP and hold the button a few seconds to ventthe part under test.

5.1

Display
The display is used to either show leak rate signals or program specific set-ups andget information by means of the software menu (Please refer to Chapter 6
Description of the Menu). In addition messages and maintenance instructions are
displayed on the screen (Please refer to Chapter 8 Error And Warning Messages).

5.2

The Screen in Run-Up Mode•

Speed of the number of revolutions•

Foreline pressure•State of emission•

Active filament•

A bar graph which shows the run-up progress
If the display is too bright or too dark you can change the contrast. Please
see Chapter 6.2.4. During run-up phase the menu button can be pushed(see Chapter 4.2.2.5) to get to the selection menu.

iina70en 05.fm

Notice:(2202)

In run-up mode the display shows:46

Operation of the UL1000 and UL1000 Fab5.3

Display in Standby modetechnical handbook

In stand by mode the states are shown in the lower edge of the display (see Chapter
5.4.3). Furthermore calibration (Please refer to Chapter 7) can also be started instand by mode and purging, too (see Chapter 5.3.1)

5.3.1

Purging
Every time when the UL1000 Fab changes into stand by mode it can start purging
automatically after 20 seconds. During this purging the scroll pump is flushed throughpurge connection (See Fig. 2-6/11).
When the machine is in stand by mode this operation also can be activated manually(Key 7). By pressing the key again the purging will be discontinued. By pressing
START the activity will be discontinued, too.

5.4

The Screen in Measurement Mode
In measurement mode the leak rates can be diplayed in two different modes:•

Numerically, combined with a bargraph Fig. 5-1•

Trend mode (leak rate versus time) Fig. 5-2

In the lower right corner of the display (next to the Soft Key no. 8) you will find asymbol that allows to switch between the display modes by pressing Soft Key no. 8.
Please refer to chapters 5.4.4 Numerical Display Mode and 5.4.5 Trend Mode for
explanations of the different display modes.

(2202)

Access to calibration (Soft Key no. 5) and access to the speaker volume (Soft Keys
no. 2 and no. 3) is the same in all modes. Also the status icons in the bottom line arein common in all display modes.

Fig. 5-1: Display, measurement mode

iina70en 05.fm

5.4.1

Call for Calibration
In all modes the Soft Key no. 5 is used to get to the calibration routine. Refer to
Chapter 7 Calibration for further information regarding calibration.

Operation of the UL1000 and UL1000 Fab47

Speaker Volume
STOP

Danger

The hearing can be harmed by the audio alarm.
The accoustic output can exceed a level of 85dB(A).
Do only expose to the audio alarm for a short time or use ear protection.
On the left hand side two loud speaker symbols are shown, combined with the signs+ and -. By pressing the corresponding softkeys (Soft Keys no. 2 and no. 3) thevolume can be adjusted for convenient loudness. In the bottom line of the display
another loud speaker symbol is shown, combined with a number. This number
indicates the level of the current loudness (ranges from 0 to 15).

technical handbook

5.4.2

Refer to Chapter 6.4.3 Volume for information on loudness, alarms, and soundtracks.

5.4.3

Status Line in the Display
The status line at the bottom of the display informs about (reading from left to right):

48

Meaning

Explanation•

Volume level

Please refer toSpeaker Volume.

S1•

Trigger 1

If the trigger values are exceeded
these signs are inverted. (White on
black background.)

S2•

Trigger 2

see: Trigger 1•••

Detected mass

Number of dots indicates the mass
number (4 dots = Helium,
2 dots = Hydrogen)•Warning triangle

Please refer to Chapter 8.1

VAC•

Working mode

VAC or SNIFF indicate which
working mode was selected (Pleaserefer to Chapter 6.3 Mode).

ULTRA

•

Vacuum area

Depending on the inlet pressure the
UL1000 and UL1000 Fab may be in
GROSS, FINE or ULTRA, which isindicated here (Chapter 4.3 Working
Modes)

5.4.2

ZERO

•

ZERO

Indicates if ZERO-function is active.

COR•

corrected leak rate

Indicates if the leak rate is displayed
as air equivalent.

Auto Leak Test•

Auto Leak Test

Indicates if this mode is active

I•ZERO•I•ZERO

Indicates if I•ZERO function is active.

STABLE•

Signal stable

Indicates if background signal isstable (see Chapter 6.6.2.2)

Operation of the UL1000 and UL1000 Fab(2202)

Chapteriina70en 05.fm

Symbol of display

5.4.4

Numerical Display Modetechnical handbook

The display shows the leak rate in big digital figures, see Fig. 5-1. The unit of the leakrate is shown, too. Underneath the leak rate the inlet pressure is displayed in smaller
digits. The units of leak rate and pressure can be defined in the menu (See Chapter
6.4.4 Units).
Below this the same leak rate is shown graphically as a bar. The scale of this bar, i.e.
the number of decades included in this bar can be defined in the menu (Please refer
to Chapter 6.2.2 Display-range auto/manual). The programmed trigger levels(Please refer to Chapters 6.4.1 and 6.4.2) are indicated at the bar by short verticallines: a straight line for trigger 1 and a dotted line for trigger 2.
In addition the inlet pressure is displayed in smaller figures above the bargraph.

5.4.5

Trend Mode

(2202)In trend mode the leak rates are displayed over time Fig. 5-2. In addition the actual
leak rate and inlet pressure also are displayed digitally. The time axis can be definedin the menu (Please refer to Chapter 6.2.3 Time axis). The intensity axis (y-axis) isdefined the same way as the bargraph (Please refer to Chapter 6.2.1 Scale linear/
logarithmic ff).

iina70en 05.fm

Fig. 5-2: Display, trend mode

Operation of the UL1000 and UL1000 Fab49

6

Description of the Menu
technical handbook

By pressing the MENU push button Fig. 6-1 the main menu will be displayed
regardless of the current working mode.

Fig. 6-1: The Main Menu
The main menu Fig. 6-1 leads the operator to several submenus described in thefollowing chapters.

6.1

Main Menu
The main menu shows 7 sub-menus. In these sub-menus groups of technicalfeatures are put together logically. From here the next levels of the menu tree can bereached.
Tip

All following chapters show the path to get to the described menu line rightunderneath the headline. This path is indicated by a dot (•).

Key No.
1

Name
Back

2

View

Description
Return to the previous screen.
Display settings like scaling, contrast, systembackground.

Mode

Please refer to Chapter 6.2.
Selection of different working modes like
Vacuum, Sniff

Trigger & Alarms

5

Calibration

6

Settings

7

Information

8

Access Control

Please refer to Chapter 6.4.
Calibration of the UL1000 and UL1000 Fab.
Please refer to Chapter 6.5.
Settings of internal machine parameters.
Please refer to Chapter 6.6.
Information on the UL1000 and UL1000 Fab(electrical and vacuum data) and servcie menu.
Please refer to Chapter 6.7.
Access restrictions.
Please refer to Chapter 6.8.

The next page gives an overview of the entire menu architecture Fig. 6-2.

50

Description of the Menu

(2202)

4

Please refer to Chapter 6.3.
Settings of units, trigger levels and alarms.

iina70en 06.fm

3

1. Level

technical handbook

View (See 6.2)

Mode (See 6.3 )Trigger & Alarms (See 6.4 )2. Level
Scale linear/logarithmic
Display-range auto/manual
Time axis
Contrast
Background in Stand by
Decimal places
Lower display limit
Sniff/Vacuum / Auto Leak Test
Trigger Level 1
Trigger Level 2
VolumeUnits
Alarm delay
Audio alarm typeinternal

Calibration (See 6.5 )external

3. Levelmanualautomatic
Edit leakrate
Start
Automatic purge (UL1000 Fab only)

Vacuum settings

Main Menu

Zero & Background
Mass
Interfaces

Settings (See 6.6 )Miscellaneous

Parameter save / load

(2202)

Monitoring functions

Information (See 6.7)

iina70en 06.fm

Vent delay
Vacuum ranges
Auto leak settings
Leak rate internal test leak
Machine factor
Background Suppression
Zero

Access Control (See 6.8)

Control Location
RS232 Protocol
Scaling Recorder Output
Recorder output
Time&Date
Language
Leak rate filter
Mains Frequency
Service interval exhaust filter
Service message exhaust filter
Load parameter set
Save parameter set
Calibration request
Particle protection
Contamination protection
Pressure limits for vacuum ranges
Pressure limits for sniff mode
Maximum evacuation time

View settings
View internal data
Vacuum diagram
View error list
Calibration history
Calibration factors
Service
Access to CAL function
Change Device PIN
Change Menu-PIN

Fig. 6-2: Menu structure overview

Description of the Menu

51

View
•

Main Menu > View

In this menu Fig. 6-3 all features that influence the way data are displayed are put
together.

technical handbook

6.2

Fig. 6-3: The View Menu
Name
Back

2

Scale linear/logarithmic

3

Display-range auto/manual

4

Time axis

5

Contrast

6

Background in Stand by

7

Decimal places

8

Lower display limit

Description
Return to the main menu.
Settings for bargraph and trend mode.
Please refer to Chapter 6.2.1.
Manual or automatic scaling. Please refer to
Chapter 6.2.2
Time axis in trend. Please refer to Chapter
6.2.3
Display contrast. Please refer to Chapter
6.2.4
Background displayed or not. Please refer to
Chapter 6.2.5
Number of decimal places. Please refer to
Chapter 6.2.6
Choice of electrical filters. Please refer to
Chapter 6.6.2

iina70en 06.fm(2202)Key No.
1

52

Description of the Menu

6.2.1

Scale linear/logarithmic•

Main Menu > View > Scale linear/logarithmic

technical handbook

These settings apply to the bargraph (= bar underneath the digital figures in themeasurement mode) and Y-axis in the trend mode.
The scale of the bargraph can either be linear or logarithmic. With the arrows (up anddown) it can be determined how many decades the bargraph covers.
Usually a logarithmic scale is recommended because leak rates may change easily
over several decades.
Softkey 2:

LinearPressing this key switches the display to a linear scale, starting at zero.
Softkey 3:

Arrow down (Number of decades)

Pressing this key reduces the number of displayed decades. The minimum value is
2 decades. Only available if log (softkey 6) was chosen.
Softkey 6:

Logarithmic

The scaling will be displayed logarithmically.
Softkey 7:

Arrow up (Number of decades)

Increase the number of displayed decades. Maximum value is 9 decades. Only
available if log (softkey 6) was chosen.

6.2.2

Display-range auto/manual•

Main Menu > View > Display-range auto/manual

The upper limit of the displayed leak rate range can be set manually or automatically.
These settings apply to the bargraph (=bar underneath the digital figures in themeasurement mode and y-axis in the trend mode).
With the upper limit defined here the lower limit is set to a value based on the numberof decades (See Chapter 6.2.1 Scale linear/logarithmic).
Softkey 2:

ManualThe upper limit of the displayed range can be set manually.

(2202)

Softkey 3:

Arrow down

.Decrease the upper limit if manual is chosen. The minimum value is 10-11 mbar l/s.
Softkey 6:

Automatic

The limit of the displayed range will be chosen automatically.
Softkey 7:

Arrow up

Increase the upper limit if manual is chosen. The maximum value is 10+3 mbar l/s.
Softkey 8:
iina70en 06.fm

Save the settings and return to the previous menu.
If linear scale is selected, the lower limit is always zero. The upper limit is only adefault value. You can change this on the measurement screen with the Soft Key 6
and 7 if you have chosen manual display ranging.

Description of the Menu

53

6.2.3Time axis•

Main Menu > View > Time axis

Softkey 3:

Arrow down

Decrease the length of the time axis. The minimum time value is 16 seconds.
The time slice is extended during the measurement mode. (Up to max. 960 s) It isdisplayed automatically during the AUTO mode.
Softkey 5:technical handbook

The length of the time axis in trend mode can be changed in steps of 16 … 960 s.

?

Help
Softkey 7:

Arrow up

Increase the length of the time axis. The maximum adjustable value is 960 seconds.

6.2.4

Contrast•

Main Menu > View > Contrast

The contrast of the display can be changed. The changes are applied synchronously.
The recommended value under regular conditions is 50 (or close to it).
Tip

If by accident the display has been set too bright or too dark so that it can
not be read off, this may be changed as follows:
Switch off the UL1000 and UL1000 Fab and turn it on again. During the runup phase press the key no. 3 or 7 so long until the display can be readproperly again. This setting is saved to the EPROM only after confirming
this through the contrast menu. If this setting is not confirmed, the former
setting will be appled after switching on the instrument on again.

Softkey 3: Arrow down
Fade the contrast to dark. The minimum values is 0.
Softkey 4: Invert display
Invert the contrast of the screen.

Help
Softkey 7: Arrow up(2202)

Softkey 5: ?

iina70en 06.fm

Fade the contrast to light. The maximum value is 99.

54

Description of the Menu

6.2.5Background in Stand by•Main Menu > View > Background in Stand bytechnical handbook

The internal background leak rate can be displayed in Standby mode (ON) or not(OFF).The default setting is OFF.
Softkey 3: Off
The background leak rate will not be shown.
Softkey 5: ?
Help
Softkey 7: ON
The background leak rate will be shown.
The internal background is generated by residual gas (e. g. helium) that has not been
pumped away yet. Sources for residual gas are air or absorbed gases from the innersurfaces of the leak detector. This internal background will never disappear totally.
Very clean systems which have been pumped for a long time will show a backgroundin the 10-11 mbar l/s range. Under normal conditions the background level is in the
10-10 mbar l/s or low 10-9 mbar l/s range.
When pressing START the current internal background is subtracted from all further
measured signals automatically. Thus it is made sure that only the net leak rate fromthe part under test is measured.
When switched to Standby / Vent again a new internal background is calculated after
25 s. The updated value is underlined. This means that if you press START when thevalue is underlined, the actual background signal will be subtracted. If you press
START when the value is not underlined, the old background signal from the lastStandby will be subtracted.

6.2.6

Decimal places•

Main Menu > View > Decimal places

The number of the decimal places of the displayed leak rate can be choosen. The
default setting is 1.
Softkey 3: 1
(2202)The leak rate will be displayed with one decimal place.
Softkey 7: 2
The leak rate will be displayed with two decimal places.

iina70en 06.fm

Two decimals are especially usefull, when the I•CAL leak rate filter (Please refer to
Chapter 6.6.5.3) is used.

Description of the Menu

55

6.2.7Lower display limit•

Main Menu > View > Lower display limit

Softkey 3, 7:
Changing of the lower detection limit between 1×10-5 and 1×10-12?

Softkey 5:technical handbook

This parameter defines the lower leak rate limit in the measurement ranges.This isvalid for vacuum modes only.

Help

6.3

Mode
•

Main Menu > Mode

The mode menu Fig. 6-4 enables the submenu to select the different working modes.

Name

1

Cancel

3

Sniff

4
5
7

Auto Leak Test
Vacuum8

OK

Description
Return to the main menu without any changesof the present settings.
The normal vacuum mode will be used. See
Chapter 4.3.2, sniffer mode.
Not used in this menu.
See Chapter 4.3.3.
The normal vacuum mode is in use
Save the settings and return to the previous
menu.

iina70en 06.fm

Key No.

(2202)

Fig. 6-4: The Mode Menu

56

Description of the Menu

6.3.1

Auto Leak Test•

Menu > Mode > Auto leak test

technical handbook

After selecting the Auto leak test mode this message pops up:

Fig. 6-5
By pressing OK button the settings menu is called (see 6.6.1.6 )Notice:If the UL1000 requests a calibration due to the mode change a calibration
message will come up.

iina70en 06.fm(2202)

Fig. 6-6

Description of the Menu

57

technical handbook

After the settings the display screen shows in STANDBY this picture:

Fig. 6-7
1

Test result

4

Background2

Measured leak rate

5

Mode

3

No. of tested parts

6

Standby

Test of parts
The test can be started by START button. When using the test chamber TC1000, thetest starts automatically when closing the chamber lid. After the setted cycle time isexpired or the measured leak rate has gone below the trigger level the test stops andthe chamber will be vented. The test can be stopped any time by STOP button.

(2202)

After starting, the test procedure runs according to the setted measurement period:

Fig. 6-8
1

Remaining measurement time

When the test chamber should remain under vacuum after switching off the UL1000
or UL1000 Fab, push the button (cup of coffee), follow the instruction on the display
and switch off the leak detector.
This function can also be used when a test of parts should be interrupted due to abrake. You can start the measurement cycle again by pushing the button RESTART.

58

Description of the Menu

iina70en 06.fm

Shut down

6.4

Trigger & Alarms•

Main Menu > Trigger & Alarms

technical handbook

The trigger levels, the volume of the loudspeaker and the units of leak rates andpressures can be set in this menu Fig. 6-9.

Fig. 6-9: The Trigger & Alarms Menu

6.4.1

Key No.
1
2
3
4

Name
Back
Trigger Level 1
Trigger Level 2
Volume

5

Units

6
7
8

Alarm delay
Audio alarm type

Description
Return to the main menu.
Definition of Trigger level 1. See chapter 6.4.1
Definition of Trigger level 2. See chapter 6.4.2
See chapter 6.4.3
Selection of leak rate and pressure units.
See chapter 6.4.4
Not used in this menu.
See chapter 6.4.5
Choice of different alarm types. See chapter 6.4.6

Trigger Level 1•

Main Menu > Trigger & Alarms > Trigger Level 1

The value of the first trigger level can be set. See Chapter 4.2.2.7 Numerical Entries
for the description of the entry.

(2202)

Trigger 1 and Trigger 2 are programmable switching thresholds. When thesethresholds will be exceeded the UL1000 and UL1000 Fab reacts as follows:
DisplayIn the status line of the display the signs for Trigger 1 and Trigger 2 are displayed
inverted if the leak rate exceeds (becomes higher than) the programmed value.
Relay Output

iina70en 06.fm

The trigger-relais of the digital out switches. Please refer to Chapter 2.3.2.2, Digitalout, for further details.
Alarm/Loudspeaker
Additionally Trigger level 1 defines at which level the various alarm types react (See
Chapter 6.4.6, Audio alarm type)

Description of the Menu

59

6.4.2

Trigger Level 2•

Main Menu > Trigger & Alarms > Trigger Level 2

If Trigger 2 is exceeded the corresponding relay will switch. This is also indicated at
the display (see above).

6.4.3

technical handbook

The value of the second trigger level can be set. Please refer to Chapter 4.2.2.7
Numerical Entries for the description of the entry.

Volume•Main Menu > Trigger & Alarms > Volume

The minimum loudness and the regular volume of the loudspeaker can be adjusted.
The minimum loudness is the minimum speaker volume that cannot be exceeded toeven lower values. Thus it is avoided that the actual volume is accidentally adjusted
to a value that is below the noise level of the environment.
The actual volume can be adjusted between 15 (maximum) and the value defined asminimum loudness.
Softkey 2:

Arrow down

Decrease the minimum loudness. The minimum value is 0.
Softkey 3:

Arrow down

Decrease the actual volume. The minimum value is limited by the minimum volume.
Softkey 4:

Beep off / Beep on

Softkey 5:?

Help
Softkey 6:

Arrow up

Increase the minimum volume. The maximum value is 15.
Softkey 7:

Arrow upiina70en 06.fm(2202)

Increase the regular volume. The maximum value is 15.

60

Description of the Menu

6.4.4Units•

Main Menu > Trigger & Alarms > Units

technical handbook

The prefered leak rate unit can be selected. There is the choice of 4 (mbar, Pa, Torr,atm)pressure units and 5 leak rate units (mbar l/s, Pa m3/s-1, Torr l/s, atm cc/s).
Notice:In Sniff mode the following measuring units are electable (Refer to chapter
6.3): ppm, g/a eq (helium leak rate is equivalent with leak rate R134a), oz/
gr eq (helium leak rate is equivalent with leak rate R134a).

Softkey 2: Arrow up
Scroll up to select a pressure unit.
Softkey 3: Arrow down
Scroll down to select a pressure unit.
Softkey 6: Arrow up
Scroll up to select a leak rate unit.
Softkey 7: Arrow down
Scroll down to select a leak rate unit.

6.4.5

Alarm delay•

Main Menu > Trigger & Alarms > Alarm delay

In some applications (for instance during pump down in a „chamber test system“) it
might be necessary to block an alarm for some time after pressing START.
This delay time of the alarm can be changed.
Softkey 3: Arrow down
Decrease the delay time. The minimum value is 0 seconds.
Softkey 7: Arrow up
Increase the delay time. The maximum value is 10 minutes up to infinity.

iina70en 06.fm(2202)

After pressing START the loudspeaker is activated as soon as the leak rate drops
below trigger level 1 or after the entered alarm delay time has elapsed. This setting
is only active for the audio alarm types SETPOINT and TRIGGER ALARM (See
Chapter 6.4.6).

Description of the Menu

61

6.4.6

Audio alarm type•

Main Menu > Trigger & Alarms > Audio alarm type

Softkey 2:

Pinpoint

Use this function to localize a leak with a well-known size. Please refer to Chapter 6.4.6.1

Softkey 3:

Leak rate prop.

The sound will be proportional to the leak rate signal. Please refer to Chapter 6.4.6.2
Softkey 5:technical handbook

The trigger of the audio alarm can be switched on or off.

?

Help
Softkey 6:

Setpoint

Please refer to Chapter 6.4.6.3

Softkey 7:

Trigger alarm

An alarm sounds when the trigger 1 is exceeded. Please refer to Chapter 6.4.6.4

6.4.6.1

Pinpoint
The tone of the acustical signal changes its frequency only in a LR-window Fig. 6-10
which ranges from one decade below the Trigger level 1 up to one decade above the
Trigger level 1. Below the window the tone is constantly low, above the window it isconstantly high.
Example: The Trigger level 1 is 4×10-7 mbar l/s. So the window where the tonechanges reaches from 4×10-8 mbar l/s up to 4×10-6 mbar l/s.
f2570 Hz -0.1 • Tr. 1

Tr. 1

10 • TR. 1

LR(2202)

491 Hz -Fig. 6-10: Pinpoint

6.4.6.2

Leak rate prop.

iina70en 06.fm

The frequency of the accoustic output is proportional to the reading on the bargraphdisplay. The frequency ranges from 300 Hz to 330 Hz. Please refer to Chapter 6.2.1
Scale linear/logarithmic for the definition of the number of decades.

62

Description of the Menu

6.4.6.3

Setpoint
The tone is off as long as the leak rate is below the Trigger level 1. Above Trigger 1
the tone varies proportional to the leak rate Fig. 6-11.

technical handbookf3000 Hz -375 Hz -no toneTr. 1

1000 • TR.1 LR

Fig. 6-11: Setpoint

6.4.6.4

Trigger alarm
As soon as the leak rate increases above trigger level 1, a multi-tone signal isgenerated. The tone does not vary with the leak rate.

6.5

Calibration•

Main Menu > Calibration(2202)

Please refer to Chapter 7 Calibration for a detailed description of the calibration.

iina70en 06.fm

Fig. 6-12: The Calibration Menu

Description of the Menu

63

Settings•

Main Menu > Settings

This menu Fig. 6-13 allows to observe and to change the settings of the internal
machine controls.

technical handbook

6.6

Fig. 6-13: The Settings Menu
Name
Back

2

Vacuum settings

3

Zero & Background

4

Mass

5

Interfaces

6

Miscellaneous

7

Parameter save / load

8

Monitoring functions

Description
Return to the main menu.
Settings of vacuum system related functions. See
chapter 6.6.1
See Chapter 6.6.2
Switching between helium and hydrogen. See
Chapter 6.6.3
Define the recorder output (analog output) andchoose the control location (local, RS232, PLC).
See Chapter 6.6.4
Change rarely necessary settings (Date,language). See Chapter 6.6.5
See Chapter 6.6.6
Choose functions of protection of the UL1000 and
UL1000 Fab. See Chapter 6.6.7

iina70en 06.fm(2202)Key No.
1

64

Description of the Menu

6.6.1

Vacuum settings•

Main Menu > Settings > Vacuum settingstechnical handbook

This menu allows to observe and to change the settings belonging to the vacuum
system.
Softkey 2: Automatic purge (UL1000 Fab only)
Refer to chapter 6.6.1.1
Softkey 3: Vent delay
Refer to chapter 6.6.1.2
Softkey 4: Vacuum ranges
Refer to chapter 6.6.1.3
Softkey 5: Auto Leak Test adjustments
Refer to chapter 6.6.1.6
Softkey 6: Leak rate internal test leak
Refer to chapter 6.6.1.4
Softkey 7: Machine factor
Refer to chapter 6.6.1.5

6.6.1.1

Automatic purge (UL1000 Fab only)•

Main Menu > Settings > Vacuum settings > Automatic purge (UL1000 Fab only)

Through this menu it is possible to program the automatic purge (Please refer to
Chapter 5.3.1) for 20 seconds when switching from measuring to standby mode.
Softkey 3: OFF
Automatic purge is switched off at standby mode.
Softkey 7: ON(2202)

Automatic purge is activated. When switching from measurement to STANDBY theforepump is rinsed automatically for 20 seconds.

6.6.1.2

Vent delay•

Main Menu > Settings > Vacuum settings > Vent delay

Through this menu item it is possible to define the delay time until the inlet port isvented when operating the STOP button. When the STOP button is pressed for aperiod of time which is shorter than the delay time specified here, the UL1000 and
UL1000 Fab will just change to Standby mode.

iina70en 06.fm

When the STOP button is pressed for a period of time which is longer than the delay
time specified here, the UL1000 and UL1000 Fab will vent the inlet port.

Description of the Menu

65

Softkey 2: Immediately
The inlet port will be vented immediately after pressing the STOP button.

The inlet port will be vented with a time delay of 1 second.
Softkey 4: After 1.5 seconds
The inlet port will be vented with a time delay of 1.5 seconds.

technical handbook

Softkey 3: After 1 second

Softkey 5: ?
Help
Softkey 6: after 2 seconds
The inlet port will be vented with a time delay of 2 seconds.
Softkey 7: No vent
The inlet port cannot be vented with the STOP button.

6.6.1.3

Vacuum ranges•

Main Menu > Settings > Vacuum settings > Vacuum ranges

With this menu you can adjust different modes concerning the activity of leakdetection. This setting is only active in mode vacuum (see Chapter 6.3).
Softkey No. 2: ULTRA ONLY
In this mode the UL1000 and UL1000 Fab remains in the area ULTRA after runningunder 0,4 mbar at the inlet flange (see Chapter 4.3.1). When showing the pressure
at the inlet flange > 0,4 mbar the UL1000 and UL1000 Fab switches immediately into
evacuation mode.
Softkey No. 3: FINE only
In this mode the UL1000 and UL1000 Fab remains after falling below 2 mbar at the
inlet flange in FINE mode. Valve V1a will be closed. When the pressure at the inlet
flange is increasing > 1 mbar the UL1000 and UL1000 Fab switches immediately
into evacuation mode. The lower detection limit of FINE ONLY is 1×10-10 mbar l/s.
The advantage of FINE ONLY is that while this mode is running no valve will switch.

In this mode the UL1000 and UL1000 Fab keeps the valve V1a closed when
pumping down in GROSS and FINE mode. So the pumping speed at the inlet is
reduced approx. by factor 2.

(2202)

Softkey No. 4: SOFTPUMP

Softkey No. 5: ?
Help

In this mode the UL1000 keeps the valve V1a open in ULTRA mode to increase thepumping speed at the inlet in this mode. This helps shortening the pump down timeat bigger testing objects.
Softkey No. 7: NORMAL (default settings)
This is the default setting. The activity runs as explained in Chapter 4.3.1.

66

Description of the Menu

iina70en 06.fm

Softkey No. 6: HIGHPUMP (only UL1000)

6.6.1.4

Leak rate internal test leak•

Main Menu > Settings > Vacuum settings > Leak rate internal test leaktechnical handbook

The value of the internal test leak can be set. See Chapter 4.2.2.7 Numerical Entries
for the description of the entry.

Warning
Normally there is no reason to edit the leak rate of the internal test leak besides after
a change of the internal test leak. A wrong leak rate of the internal test leak will leadto wrong leak rate readings!

6.6.1.5

Machine factor•

Main Menu > Settings > Vacuum settings > Machine factor

The machine factor takes into account that an additional external pump set is used.
Based on an internal calibration only, all measured leak rate would be measured too
small. The measured leak rate is multiplied with the machine factor and the result is
displayed. This factor is only used for vacuum measurement modes (not for sniffmode). See Chapter 4.2.2.7 Numerical Entries for the description of the entry.
The machine factor can be estimated by taking into consideration the Helium
absorbing capability of the UL1000 and UL1000 Fab and the external pump.
Exactly, this is the result of the measured leak rate of an external test leak on the test
sample once with and then without the external pump. The difference between thetwo results is the machine factor.
Adjust the machine factor to the value 400 when using the helium sniffer QT100.
The machine factor can be used to correct the leak rate indication to an air equivalentreading. By using this setting the display reads the leak rate equivalent to air. (Themachine factor for this correction is 3,7 x 10E-1 ). When using this setting the status
is indicated on the display by COR.

(2202)To return to standard indication of the leak rate, use the default settings (machine
factor is 1.0).

6.6.1.6

Auto Leak Test adjustments•

Menu >Settings >Vacuum Settings > Auto Leak Test settings

All parameters for a test at hermetic sealed parts can be setted.
Measurement period

iina70en 06.fm

The Measurement period can be setted between a Minimum and a Maximum value(see Fig. 6-14 ).

Description of the Menu

67

Settings:

Interval:

1 - 20 sec

1 sec steps

20 - 30 sec

2 sec steps

30 - 60 sec

5 sec steps

1 - 30 min

10 sec steps

3 - 10 min

30 sec steps

10 - 30 min

1 min steps

technical handbook

time

The measurement period (Maximum value) depends on the volume of the chamber,volume of the tested object and the rejectant leak rate.
If the measured leak rate has gone below the trigger level, the measurement period
will be finished with the result PASS even if the maximum value of the measurement
period is not reached.

Fig. 6-14 Measurement period

Range of rejectant level

Measurement Period

10E-5

2 sec

10E-6

2 sec

10E-7

2 sec

10E-8

>5 sec10E-9>10 sec**external calibration with a 10E-9 test leak ( i.e. TL 9 ) recommended
After changing the measurement time a calibration request could be asked.

iina70en 06.fm

Notice:(2202)

Examples for time settings(using the Inficon Test Chamber with a volume of 430 cm³):

68

Description of the Menu

Trigger level 1

technical handbook

The rejectant level for a part to be tested can be set in the range from 10-1 to
10-9 mbar l/s.

Fig. 6-15
Series error messages
The number of failed parts in series can be set from 1 to 9. In disable mode thisfunction is switched off.

Fig. 6-16

iina70en 06.fm(2202)

Now a REFERENCE MEASUREMENT (see no. 1 in fig. 6-19) can be started to clean thetest chamber and measure the background level that will be subtracted from thefollowing measurements.

Description of the Menu

69

Part under test

technical handbook

The number of the first part to be tested can be entered. The number counts
automatically up at the next test cycle. In disable mode this function is switched off.

Fig. 6-17
Reference measurement

Fig. 6-18
This mode can be used to clean up the chamber after a helium contamination or aftera series of failed parts. The chamber will be pumped down and vented 3 times.

Fig. 6-19

70

Description of the Menu

iina70en 06.fm(2202)The Reference measurement includes a calibration procedure with the internal test
leak TL of UL1000. After this clean up the actual helium background is measured
and will be subtracted from the following measurements.
The new values of the measured background will be saved automatically:6.6.2

Zero & Background•

Main Menu > Settings > Zero & Backgroundtechnical handbook

The kind of background suppression inside the UL1000 and UL1000 Fab and thefunction of the Zero button can be selected.
Softkey 3: Background suppression
Refer to Chapter 6.6.2.1
Softkey 7: Zero
Refer to Chapter 6.6.2.2

6.6.2.1

Background Suppression•

Main Menu > Settings > Zero & Background > Background Suppression

For each measurement, the internal helium background is subtracted by pressing the
START key.
Softkey 3:

OffInternal background suppression is switched off
Softkey 7

On

The internal background (see Chapter 6.2.5) will be calculated when switching to
STANDBY mode. This value will be subtracted when pressing START.

6.6.2.2

Zero•

Main Menu > Settings > Zero & Background > Zero

This setting enables (respectively disables) the ZERO button at the control panel.
Softkey 2:

Zero at ULTRA

iina70en 06.fm(2202)

With “Zero at ULTRA” the ZERO functions executes automatically as soon as themeasuring range ULTRA is reched for the first time after START. In this mode theZERO function also can be executed manually via the ZERO button.
Softkey 3:

Disable: ZERO function

Softkey 5:

Help

Softkey 6:

I•ZeroThe Zero function is locked as long as the leak rate signal is not stable enough todetect a leak of the programmed value of Trigger 1.
The function „I•Zero“ enables the ZERO button only at stable leak rate signals. Thisis displayed in the status bar through the STABLE signal.
By the standard Zero function the actual background value will subtracted whenpressing ZERO. At falling background signals smaller leaks could be missed
because the subtracted background value is higher than the leakrate signal at the
moment of measuring.
By „I•Zero“ the drift of the falling background signal is checked, if it is higher than
0.5 x trigger value 1 (adjusted to the desired rejection level).
If I•Zero function is active, the configured trigger value 1 is displayed.
Softkey 7:

Enable: ZERO function

Description of the Menu

71

6.6.3Mass•

Main Menu > Settings > Mass

Softkey 2: H2 (2 amu)
Hydrogen with the mass of 2 amu will be measured.
Softkey 3: 3He (3 amu)

technical handbook

The requested mass of the measured gas can be selected. The UL1000 and UL1000
Fab must be in Standby.

Isotop of helium with the mass of 3 amu will be measured.
Softkey 7: 4He (4 amu)
Helium with the mass of 4 amu will be measured.

6.6.4

Interfaces•

Main Menu > Settings > Interfaces

The parameters of the interface can be set.
Softkey 3: Control Location
Please refer to Chapter 6.6.4.1
Softkey 4: RS232 Protocol
Please refer to Chapter 6.6.4.2
Softkey 7: Recorder output
Please refer to Chapter 6.6.4.3
Softkey 8: Scaling Recorder Output

iina70en 06.fm(2202)

Please refer to Chapter 6.6.4.4

72

Description of the Menu

6.6.4.1

Control Location•

Main Menu > Settings > Interfaces > Control Location

technical handbook

Softkey 2:

PLC

The UL1000 and UL1000 Fab is controlled via the Digital In connector (See Chapter
2.3.2.3). The START, STOP and ZERO buttons at the control panel are locked.
Softkey 3:

RS232

The UL1000 and UL1000 Fab is controlled via RS232 interface by an external
computer. In this mode the UL1000 and UL1000 Fab can not be controlled via
keyboard. The START, STOP and ZERO button at the machine are deactivated.
Taste Nr. 4 All
UL1000 and UL1000 Fab can be operated via the digital input, the RS232-interface
and the keyboard.
Softkey 5:

Local & PLC

The UL1000 and UL1000 Fab is controlled via the Digital In connector or the
START, STOP and ZERO buttons at the control panel.
Softkey 6:

Local & RS232

The UL1000 and UL1000 Fab is controlled via the Digital In connector or the
START, STOP and ZERO buttons at the control panel.
Softkey 7:

Local

iina70en 06.fm(2202)The UL1000 and UL1000 Fab is controlled via the START, STOP and ZERO buttons
at the control panel. The Digital In connector is not used.

Description of the Menu

73

6.6.4.2

RS232 Protocol•

Main Menu > Settings > Interfaces > RS232 Protocol

Gives the chance to read parameters, e.g. during maintenance.
Softkey 4: Printer Manual
Leak rates measured by this function can be sent to RS232 printers or PC. The
measured value can be displayed via hyperterminal programs. The baudrate of thisprinter function is set to 9600, 8N1. Connected data loggers must be set to theseparameters.

technical handbook

Softkey 3: Diagnostics

Format of the leak rate output:
LR = 1.00E-10 09:Apr.07 08:25 MEASLR:

Leak rate
The measured value is equal to the number which then follows. In caseof overflow or underflow the symbol < (leak rate is less then the statedvalue) or > (leak rate is greater than the stated value) is output
accordingly.

1.00E-10:

Output of the measured value in the unit set up, followed by date and
time.

MEAS:

The UL1000 / UL1000Fab is in the measure mode.

When pressing the START button once again in the measure mode or activation of
the START input at the DIGITAL IN port the leak rate will be send out.
Softkey 5: ?
Help
Softkey 6: UL2xx Leak Ware
Gives the chance to control and read measurement values when connecting to acomputer.
Notice:

The calibration function of the Leak Ware is not appropriate to operate with
the UL1000 and UL1000 Fab.
Please execute the function „STORE DATE“ in the operating mode „Single
Part Measurement“ for starting the record of the measured values.

Softkey 7: ASCII

iina70en 06.fm(2202)

Gives the chance to use the UL1000 and UL1000 Fab via a RS232 terminal.

74

Description of the Menu

6.6.4.3

Recorder output•

Main Menu > Settings > Interfaces > Recorder output

The signals to be recorded can be selected in this submenu.
technical handbook

Softkey 1: Cancel
Return to the previous menu without any changes of the present settings.
Softkey 2: Arrow up
Adress recorder output 1 or 2
Softkey 3: Arrow down
Adress recorder output 1 or 2
Softkey 5: Help
Softkey 6: Arrow up
Behaviour recorder output. For further information see keywords below.
Softkey 7: Arrow down
Behaviour recorder output. For further information see keywords below.
Softkey 8: ok
Saving off chosen parameters(2202)

Fig. 6-20
Off
The recorder output is switched off.
p1 / p2

iina70en 06.fm

The fundamental output voltage is scaled logarithmic. The inlet pressure p1 or theforevacuum pressure p2 can be recorded.
The signals p1 and p2 have the characteristics of the Pirani gauge TPR265 (see chart
in appendix).

Description of the Menu

75

LR lin
The leak rate output voltage is scaled linear. The fundamental voltage is 0-10 V inscalable steps from 0.5 to 10 volts per decade.

LR log
The leakrate is recorded on a logarithmic scale. The voltage output ranges from1 … 10 V with steps of 0.5 V per decade.

0

1

2

3

4

5

6

7

8

9

10

10 -12 10 -10 10 -8 10 -6 10 -4 10 -2 10 0 10 +2

technical handbook

For information about scaling see chapter 6.6.4.4

V
LR in channel

Fig. 6-21 Example of range of leak rate, log, 0.5 V/decade
For adjusting of scaling see chapter 6.6.4.4.
LR mantissa
The leak rate mantissa is recorded linearly from 1 … 10 V.
LR exponent
The exponent is recorded like a step function: U = 1 … 10 V with steps of 0.5 V per
decade, starting with 1 V = 1×10-12.

6.6.4.4

Scaling Recorder Output•

Main Menu > Settings > Interfaces > Scaling Recorder Output

Here the scaling of the recorder output can be adjusted. This adjustment is only valid
for the setting “LR lin” or ”LR log” (refer to Chapter 6.6.4.3 Recorder output).
Softkey 2:

Arrow up

Adjust decade of the upper limit value
Arrow down

Scaling of the previously adjusted value in steps of 0.5, 1, 2, 2.5, 5, 10 Volt/decade. The
complete voltage range is 10 V. (Only for signal “LRlog”)

Softkey 6:

Arrow up

(2202)

Softkey 3:

Adjust decade of the upper limit value
Softkey 7:

Arrow down

Example:Chart recorder output: “LRlog”
Upper limit value is adjusted to 10-5 (= 10V)
Scaled to 5 V/decade
Lower limit value consequently is 10-7(= 0 V)

76

Description of the Menu

iina70en 06.fm

Scaling of the previously adjusted value in steps of 0.5, 1, 2, 2.5, 5, 10 Volt/decade.
The complete voltage range is 10 V. (Only for signal “LRlog”)

6.6.5

Miscellaneous•

Main Menu > Settings > Miscellaneoustechnical handbook

The actual date and time, the prefered language and the mains frequency can be set
in this submenu.
Softkey 2: Time&Date
Please refer to Chapter 6.6.5.1

Softkey 3: Language
Please refer to Chapter 6.6.5.2

Softkey 4: Leak rate filter
Please refer to Chapter 6.6.5.3

Softkey 6: Mains Frequency
Please refer to Chapter 6.6.5.4

Softkey 7:
Service interval exhaust filter.
Softkey 8:Service message exhaust filter.

6.6.5.1

Time&Date•

Main Menu > Settings > Miscellaneous > Time&Date

Date and time can be changed on two subsequent pages. Please refer to Chapter
4.2.2.7 Numerical Entries for the description of the entry.

6.6.5.2

Language•

Main Menu > Settings > Miscellaneous > Language

The prefered language can be selected by pressing Softkey 3 and 7. The default
setting is english.

Notice:The default setting can be resetted by pressing the softkey 2 and 6
simultaneously during run-up of the leak detector.

iina70en 06.fm(2202)

Selectable languages: English, German, French, Italian, Spanish, Polish, Chinese(Mandarin), Japanese (Katakana), Korean.

Description of the Menu

77

6.6.5.3

Leak rate filter•

Main Menu > Settings > Miscellaneous > Leak rate filter

Softkey 3:

Fixed

A filter with a fixed time constant will be used.
Softkey 5:?

Help
Softkey 7:technical handbook

The kind of the leak rate filter can be chosen. The default value is I•CAL.

I•CALI•CAL makes sure that the averaging time is optimal based on the leak rate level.
I•CAL stands for Intelligent Calculation Algorithm of leak rates. It makes sure that thesignals are averaged in optimized time intervals, based on the leak rate intensity.
I•CAL also eliminates noise peaks which are not related to leak rate signals andprovides unexpected short response times for low leak rate signals.
The algorithm used provide excellent sensitivity and response time and is there forthe recommended setting.

6.6.5.4

Mains Frequency•

Main Menu > Settings > Miscellaneous > Mains Frequency

The mains frequency takes the different pumping speed of the scroll pump into
account. The frequency of the mains power supply can be selected. The default
setting is 50 Hz for 230 V and 60 Hz for 115 V.
Softkey 3: 50 Hz
The UL1000 and UL1000 Fab will be run at a mains frequency of 50 Hz.
Softkey 6: 60 Hz
The UL1000 and UL1000 Fab will be run at a mains frequency of 60 Hz.

6.6.5.5

Service interval exhaust filter

Softkey 3: Down
Decrease of the service intervall steps of within 500 hours.

(2202)

Here you can enter the service intervall of the exhaust filter.

Softkey 5: ?
Help
Softkey 7: Upiina70en 06.fm

Increase of the service intervall within steps of 500 hours. The limit is 4000 hours.

78

Description of the Menu

6.6.5.6

Service message exhaust filter

technical handbook

The exhaust filter must be maintained at regular intervals to ensure the correctfunction of the UL1000 and UL1000 Fab. If the service message is activated, theUL1000 and UL1000 Fab reminds you of the required maintenance.
Softkey 3: Off
Softkey 5: Help
Softkey 7: On

Warning
If the service messages are ignored and the exhaust is not replaced a risk foroverheating the pump motor exists.

6.6.6

Parameter save / load•

Main Menu > Settings > Parameter save / load > Load

Enables to save and load individual settings or reload the default settings.
Softkey 2 to 4: The names of the current values can be saved under a freechoosable name. The saving of 3 different sets is possible.
Please refer to Chapter 6.6.6.1
Softkey 5:load default values

The factory setting have to be loaded again.
Softkey 6 to 8: One of three saved parameter sets can be loaded.
Please refer to Chapter 6.6.1.3

6.6.6.1

Load parameter set•

Main Menu > Settings > Parameter save / load > Save

Softkey 4: Edit a file name
Rename the parameter set.

iina70en 06.fm(2202)

Save the current parameter settings.

Description of the Menu

79

6.6.6.2

Save parameter set•

Main Menu > Settings > Parameter save / load > Load parameter set

Softkey 6: Arrow up
Upward to the previous screen.
Softkey 7: Arrow down

technical handbook

The settings of the selected saved parameter set will be displayed and can bereloaded.

Downward to the next screen.

6.6.7

Monitoring functions•

Main Menu > Settings > Monitoring functions

Calibration request•

Main Menu > Settings > Monitoring functions > Calibration request

It can be selected whether the operator is reminded of the fact that a calibration may
has become necessary or not. The default value is off.
Softkey 3: Off
The calibration request will be switched off.
Softkey 7: ON
The calibration request will be switched on.
If the calibration request is switched on, a corresponding message will appear when
30 minutes have elapsed after power on or if the temperature of the UL1000 and
UL1000 Fab has changed by more than 5 °C (9 °F) since the last calibration.
Particle protection•

Main Menu > Settings > Monitoring functions > Particle Protection

If switched on the UL1000 and UL1000 Fab will not start pumping down before theinlet has not dropped below 1 mbar. e.g. it is assumed that the part under test is
pumped by another pump in parallel.
Purpose: When the leak detector does not pump at high pressures no gas stream,
possibly carrying particles gets into the leak detector.

(2202)

This mode can be switched on and off.

Softkey 3: Off
Softkey 5: Helpiina70en 06.fm

Softkey 7: ON

80

Description of the Menu

Contamination protection

technical handbook•

Main Menu > Settings > Monitoring functions > Contamination protection

If this mode is switched on the UL1000 and UL1000 Fab closes all inlet valves assoon as the measured leak rate exceeds the programmed leak rate. Thus no more
Helium gets into the mass spectrometer. Helium that has gotten into the tool under
test can be pumped away by the tool pump. If no extra pump is available it isrecommended to vent the part before the test is continued.
Softkey 3: Off
Softkey 4: edit the limit value
Edit the limit value for switching off
Softkey 5: Help
Softkey 7: ON
Softkey 8: OK
Pressure limits for vacuum ranges
Main Menu > Settings > Monitoring functions>Pressure limits for vacuum ranges
With this function you can adjust the switching point between the modes GROSSFINE-ULTRA. This can be essential when other gases than air are pumped with the
UL1000 and UL1000 Fab. The control signal of the Pirani may vary at other gases
than air. Therefore it may be necessary to adjust the switching points.
Softkey No. 2, 6: Change over threshold EVAC-GROSS.15-3 mbar (Default value 15 mbar)
Softkey No. 3, 7: Change over threshold GROSS-FINE
2-0,5 mbar (Default value 2 mbar).
When changing this values the change over FINE-ULTRA threshold willautomatically be retightend to 0,4 - 0,1 mbar.
Softkey No. 4

Adjustment for ARGON

Press again the softkey for default values for air.

(2202)

Softkey No. 5:?

Help
Pressure limits for sniff mode•

Main Menu > Settings > Monitoring functions > Pressure limits for sniff modeThis function is automatically activated in sniff mode. The pressure limits define an
upper and lower limit of the inlet pressure. The upper limit is 2 mbar, the lower limit
is 0.02 mbar. If the pressure is not in this range error messages are generated:iina70en 06.fm

P > upper limit: Capillary broken
P < lower limit: Flow through capillary too low (Capillary blocked)

Description of the Menu

81

Setting of the maximal pressure: upper limit 2 mbar

Softkey 4 and 7:

Setting of the minimal pressure: lower limit 0.02 mba

Softkey 5:

Help

Maximum evacuation time•

Main Menu > Settings > Monitoring functions > Maximun evacuation time

technical handbook

Softkey 3 and 6:

This menu item is used to define when the gross leak message is to occur. The grossleak detection process operates in two steps and the limits can be adapted as
required.
This menu item is particularly useful in series testing under the same conditions at
all times.
After pressing the start button the test sample is evacuated. If the pressure
conditions (p1 < 100 mbar) are not attained, or if the pressure does not drop low
enough within the periods of time specified here, the pumpdown process is
terminated and the display will indicate a message (see 8.2, W76).
The periods which are selected in each case depend firstly on the desired reaction
time for the gross leak message, and secondly on the volume of the test sample andthe effective pumping speed.
Caution: If the evacuation time was set to endless, the oil level of the mechanicalpump should be checked more often.
Softkey No. 2:Decreasing maximum evacuation time until p1 < 100 mbar. Within this period of timethe inlet pressure at the test flange must have dropped below 100 mbar. The
duration may be selected freely between 1 second and 9 minutes or can be set toendless. The default is 30 seconds.
Softkey No. 3:Decreasing maximum time until measurement Within the period of this time thestatus of measurement readiness must have been attained, i.e. the inlet pressuremust have dropped below 15 mbar. The duration may be freely selected between 5
seconds and 30 minutes or can be set to endless.
?

Help text
Softkey No. 6:

(2202)

Softkey No. 5:

Increasing maximum evacuation time until p1 < 100 mbar
Softkey No. 7

iina70en 06.fm

Increasing maximum time until measurement.

82

Description of the Menu

6.7

Information•

Main Menu > Information

technical handbook

The Information Menu Fig. 6-22 enables submenus to select different kinds ofinformation belonging to the UL1000 and UL1000 Fab.

Fig. 6-22: The Information Menu
Softkey 2: View settings
The current settings will be displayed on 4 pages, e.g. trigger levels, test leak
mass, date and time.
Softkey 3: View internal data
Information on measured internal data is provided on 4 screens.
Softkey 4: Vacuum diagram
The vacuum diagram of the UL1000 and UL1000 Fab is shown. Here you
can see which valves are opend or closed momentarily and more.
Softkey 5: View error list
The list of occured errors and warnings will be displayed.
Softkey 6: Calibration history
The carried out calibrations will be listed.
Softkey 7: Calibration factors(2202)

The calibration factors for the different masses, the machine factor will be
displayed.
Softkey 8: Service
Please refer to Chapter 6.7.1

6.7.1

Serviceiina70en 06.fm•

Main Menu > Information > Service

With the main menu special functions can be accomplished (e. g. manual switchingof the valves). The access to the service menu is protected by a PIN. This PIN is notcommunicated with the delivery of the leak detector but after an adequate service
training. For more information concerning the service menu see instructions(iipa74e1).

Description of the Menu

83

Access Control•

Main Menu > Access Control

With this menu you can deny or allow access to specific functions of the UL1000 and
UL1000 Fab.

technical handbook

6.8

Fig. 6-23: The Access Control Menu
Softkey 2: Access to CAL function
Please refer to Chapter 6.8.1

Softkey 3

Access to Trigger&Alarme menu

Please refer to Chapter 6.8.2

Softkey 7: Change device-PIN
Please refer to Chapter 6.8.3

Softkey 8: Change Menu-PIN
Please refer to Chapter 6.8.4

6.8.1

Access to CAL function•

Main Menu > Access Control > Access to CAL function

It can be selected whether the access to the calibration menu is restricted or not.

The calibration function is only available at the main menu. If the Menu-PIN(See Chapter 6.8.4) is activated you need this PIN to start a calibration.

(2202)

Softkey 3: Off

Softkey 5: ?
Help
Softkey 7: ON
The calibration function is available at the main menu and in Standby and themeasure mode.

Save the settings and return to the previous menu.

84

Description of the Menu

iina70en 06.fm

Softkey 8: OK

6.8.2

Access to Trigger&Alarme menu•

Main Menu > Access Control > Access to Trigger&Alarme menu

technical handbook

That allows access to this function (see 6.4) even at a blocked menu access (see6.8.4).

6.8.3

Change Device PIN•

Main Menu > Access Control > Change Device PIN

The access to the UL1000 and UL1000 Fab can be restricted by a Device-PIN. If theDevice-PIN is not 0000 the UL1000 and UL1000 Fab will ask for this PIN directly after
power on. Without device-PIN the UL1000 and UL1000 Fab foes not even switch on
the pumps.
Notice:6.8.4

Under all circumstances memorize the PINs! The PIN can only be reset by
INFICON’s service organization.

Change Menu-PIN•

Main Menu > Access Control > Change Menu-PIN

The access to the menu can be restricted by entering or changing the personal
identification number (PIN). No PIN will be checked if 0000 is entered.
Please refer to Chapter 4.2.2.7 Numerical Entries for the description of the entry.

Under all circumstances memorize the PINs! The PIN can only be reset by
INFICON’s service organization.

iina70en 06.fm(2202)

Notice:Description of the Menu

85

Calibration

7.1

Introduction
The UL1000 and UL1000 Fab can be calibrated in two different ways:•

Internal calibration by means of a built-in leak standard.

•

External calibration by means of an additional leak standard which then is
attached to the inlet port or the component under test.

technical handbook

7

During the calibration procedure the mass spectrometer is tuned to the maximum
helium signal and this signal is referred to the known leak rate of the internal orexternal leak standard. Although the UL1000 and UL1000 Fab is a very stable
instrument a calibration is recommended from time to time to make sure that ambient
temperature changes or dirt or other impacts don’t adulterate the measurements.
When the unit is used constantly the calibration should be performed at least once aday. Otherwise the frequency of calibration depends on the frequency of use.
Notice:To get an optimized calibration the machine has to warm up at least 20
minutes before use.

Test leaks for calibration should not have a range lower than 1×10-9 mbar l/s toensure a stable calibration signal.

7.2

The calibration routines
The calibration routines can be started by pressing button CAL (Softkey 5) via 3
different locations:•main menu•

Stand by mode•measurement mode

The access via Stand by mode or measurement mode can possibly be not available.
(Refer to chapter Access to CAL function). In this case there will be no inscription on
the correspondingly Soft Key.

iina70en 07.fm

Once the calibration mode is activated the user must choose between an internal andan external calibration. Please press the corresponding Soft Key.

(2202)A calibration may be terminated at any time by pressing the STOP Button or using
the Soft Key no. 1 (Cancel).

86

Calibration

7.2.1

Internal Calibration

technical handbook

For internal calibrations the UL1000 and UL1000 Fab differentiates between two
possibilities:•

If the unit is blanked off or disconnected from any chamber by a valve on the Inlet
Port the automatic calibration can be chosen (Soft Key no. 8).

•

If the unit is connected to a chamber or a bigger component the calibration has tobe performed manually because the reaction times on opening or closing theinternal leak standard vary depending on the volume of the chamber.

Notice:7.2.1.1

It is recommended to use the automatic calibration if possible.

Automatic Internal Calibration
Once this procedure is started the entire procedure is performed automatically. At theend (after about 25 s) a beep is released. Thereafter the unit is ready for further use.

7.2.1.2

Manual Internal Calibration
When Manual Internal Calibration is selected it is assumed that the UL1000 and
UL1000 Fab is connected to a component under test (if not please go to AutomaticInternal Calibration).
After starting the Manual Internal Calibration the UL1000 and UL1000 Fab pumps
down the test part (if not already under vacuum) and opens the internal leakstandard. Depending on the volume of the part it may take some time for the helium
signal to stabilize. Therefore the user has to confirm that the signal has reached astable level (Soft Key no. 8).
The unit now runs through the tuning process and closes the internal leak standard
automatically. Again the volume of the test part determines how long it takes to pumpdown the helium and to reach a stable background level, which has to be confirmedby the user.
Thereafter the unit is calibrated.

(2202)

7.2.2

External Calibration
For an external calibration a leak standard has to be attached to the part under testor the inlet port directly.
Notice:The shown leak rate can diverge of the printed values of the external
calibrated leak because of uncertainities and temperature coefficients.

iina70en 07.fm

After External Calibration (Soft Key no. 8) has been chosen the following messages
are displayed and the described actions are required:

Calibration87

Make sure that the test leak is connected and opened.

•

Check the leak rate printed on the test leak and compare it with the leak rate at
the display. If the leak rates are not identical press Edit leak rate (Soft Key no. 4)
and correct the value.

•

If the leak rates are okay press START (Soft Key no. 8).

technical handbook•

Fig. 7-1: External Calibration, Step 1•

No action required.

Fig. 7-2: External Calibration, Step 2
The bargraph display shows a signal which must not vary much. If so pleasepress OK (Soft Key no. 8).

Fig. 7-3: External Calibration, Step 3

88

Calibration

iina70en 07.fm(2202)•

No action required.

technical handbook•

Fig. 7-4: External Calibration, Step 4•

No action required.

Fig. 7-5: External Calibration, Step 5
Close the external leak standard and confirm with OK (Soft Key no. 8).

(2202)•

iina70en 07.fm

Fig. 7-6: External Calibration, Step 6

Calibration

89

The bargraph display shows a signal which must not decrease any more. Theremight be a small fluctuation which is okay. If so please press OK (Soft Key no. 8).

technical handbook•

Fig. 7-7: External Calibration, Step 7•

The UL1000 and UL1000 Fab displays the old and the calculated new calibration
factor.

iina70en 07.fm(2202)

Fig. 7-8: External Calibration, Step 8

90

Calibration

7.3

Factor of Calibration - Range of Values

technical handbook

To avoid a faulty calibration the factor of calibration is tested for plausibility at the endof the calibration routine:
When the new factor of calibration is not considerably higher or lower (< factor 2)
than the previous factor of calibration the new factor will be accepted automatically.
When the new factor of calibration diverges stronger from the previous factor theuser can decide if he wants to accept it anyway (e. g. after changing the system
configuration) or not (e. g. because of a maloperation).
Notice:When calibration is started via SPS or RS232 no testing for plausibility is
occuring.

iina70en 07.fm(2202)

When calibrating internal it is also monitored if the newly calculated factor of
calibration is higher than 10 or lower than 0.1. In this case a warning (see W81 resp.
W82 in chapter Refer to chapter 8.2) is displayed and the calibration will beinterrupted.

Calibration91

8

Error And Warning Messages

An audio signal is generated when an error or warning occurs. The frequencychanges every 400 ms from 500 Hz to 1200 Hz and vice versa so that the signal
stands out well from ambient noises normally encountered.
Error and warning messages are logged and can also be displayed at a later timethrough the menu information (6.7)

8.1

technical handbook

The UL1000 and UL1000 Fab is equipped with a comprehensive self-diagnostic
facilities. If an error or warning condition is detected it is indicated via the LC display
to the operator.

Hints
Warning Messages
Warnings will be indicated•when the UL1000 and UL1000 Fab detects an abnormal condition or•when it wants to remind the operator of something (e.g. a request for calibration
or a service timer has expired).

The UL1000 and UL1000 Fab will indicate a message on the LC display and willremain in the Standby or the measurement mode.
Warning messages will remain on the LC display until the warning has been
acknowledged by pressing „OK“ (Key no. 8). After that the UL1000 and UL1000 Fab
can be used again (possibly with some restrictions). As long as a warning statusexists the status line shows a warning triangle (See Chapter 5.4.3).
The warning messages can be displayed in STANDBY by pressing the button(shows up when warning message occured).
Error Messages

Error messages remain on the LC display until the message has been acknowledgedby pressing „Restart“ (key no. 8). After that, the UL1000 and UL1000 Fab restarts
with a new run-up procedure. In some cases it may be helpful to check some settings
or measured values before the UL1000 and UL1000 Fab restarts. Therefore it is also
possible to press „Menu“ (key no. 4 or Menu key) to enter the UL1000 and UL1000
Fab menu. After leaving the menu the same error message will be displayed again.
Under extreme conditions the built-in „watchdog“ circuit will prevent
uncontrolled operation of the UL1000 and UL1000 Fab. This watchdog willcause the UL1000 and UL1000 Fab to restart. After having done so, theinstrument will be running in the Standby mode. No error message will be
output.

iina70en 08.fm

Notice:(2202)

Errors are events which force the UL1000 and UL1000 Fab to interrupt its
measurement operations. In this case the UL1000 and UL1000 Fab closes all valves(Standby mode).

92

Error And Warning Messages

8.2

List of Errors & Warnings

technical handbook

The following pages contain a list of all errors and warnings displayed at the control
panel. Warning messages are indicated by numbers with a leading W. Error
messages are indicated by numbers with a leading E.
No.

Displayed Message

Description and possible solutions

E03 Suppressor test failed

W03 Supressor test failed•

The MSV card is defective•

The preamplifier is defective•

The suppressor cable is faulty•

The MSV card is defective•

The preamplifier is defective•

The suppressor cable is faulty

E04 Temperaturemonitoring, Short circuit in the temperature sensor
turbo molecular pump is
defectt
E05 Temperaturemonitoring, Temperature sensor disconnected
turbo molecular pump is
defect
E07 TMP power supply faulty

Check power pack output voltage

E08 TMP acceleration time too Frequency 15 min. after start < 1200 Hz
high!
W15 Leakrae is too high! Machine The survey function „contamination“ is activated. A leak rate higher thanswitched into standby to the adjusted value was detected.
prevent contamination.
• Gross leak•

Switch off limit is set too low•

Alarm delay time too short

W16 Turbo
molecular
pump The service intervall for the turbo molecular pump is expired.
service interval expired!
W17 Forepump
expired!

serviceinterval The service intervall for the fore pump is expired.

W18 Exhaust filter service interval The service intervall for the exhaust filter is expired.
expired!

iina70en 08.fm(2202)

W21 EEPROM write time out

EEPROM defective
MC 68 defective

W22 EEPROM parameter queue EEPROM defective
overflow
MC 68 defective
E23 24V of the OPTION socket is The tension 24V at socket OPTION is too high.
too high
E24 24V at socket OPTION is too •low.

Fuse F2 on the I/O board has blown

E25 Receded valve voltage too •low (< 7V).

I/O board is faulty.

W28 Real time clock reset! Please •enter date and time!
•

Battery at MC68 is discharged or faulty.
MC68 had been replaced.

E29 24V supply for fans ist too low •(< 20V).

Fuse F1 on wiring backplane has blown.

E30 24 V of the remote control is •too low (> 20V).

Fuse F1 on the I/O-board has blown.

Error And Warning Messages

93Displayed Message

E03 Suppressor test failed

W03 Supressor test failed

Description and possible solutions•

The MSV card is defective•

The preamplifier is defective•

The suppressor cable is faulty•

The MSV card is defective•

The preamplifier is defective•

The suppressor cable is faulty

W31 The offset voltage of the •preamplifier is too high(> 5mV).

The preamplifier is faulty.

W32 Preamplifier temperatur is too •high (> 60°C).
•

Ambient temperature is too high.

W33 Preamplifier temperature is •too low (< 2°C).
•

Ambient temperature is too low.

technical handbook

No.

Air filter dirty.
Temperature sensor is faulty.

E34 24V voltage at MSV board is Signal MVPZN on the MSV board is active. 24 V signal voltage is too low,
too low!
U < 18.3 V.
•

Fuse F1 on the MSV board has blown.

•

24 V power supply voltage is missing.
Switch off the UL1000 and UL1000 Fab!
The missing voltage will cause the exhaust valve on the scroll pump toclose which in turn can lead to a contamination of the vacuum system.

•

Reference voltage UREF on the MSV board XT7/1 is too high, U > 5 V.

E35 Anode-cathode voltage is too •high!
•

MSV board is faulty.

E36 Anode-cathode voltage is too •low.
•

MSV board is faulty.

Anode-cathode voltage is higher than 130 V.
Anode-cathode voltage is lower than 130 V.

E37 Suppressor voltage reference Signal MFSZH on MSV board is active. Suppressor signal command
value too high!
variable is too high.

E38 Suppressor
high!

potential•

Suppressor voltage has a short circuit.

•

MSV is faulty.

too Suppressor potential is higher than 363V.
•

MSV board is faulty.

E40 The anode potential exceeds The actual anode potential exceeds its nominal value by 10%. The
its norminal value by over nominal value can be displayed in the service menu.
10%!
• MSV is faulty.

(2202)

E39 Suppressor potential is too Supressor potential is lower than 297V.
low.
• MSV board is faulty.

E41 The anode potential has The actual anode potential has dropped below its nominal value by 10%.
dropped below its nominal The nominal value can be displayed in the service menu.
value by over 10%!
• Air inrush.
MSV is faulty.

•

94

Error And Warning Messages

Nominal value of the anode voltage is too high. Anode voltage is limited
to about 1,200 V.

iina70en 08.fm•

E42 Nominal value of the anode Signal MFAZH on MSV board is active.
potential is too high!
• Anode voltage has been short circuited.

No.

Displayed Message

technical handbook

E03 Suppressor test failed

W03 Supressor test failed

E43 Cathode current is too high!

E44 Cathode current is too low!

Description and possible solutions•

The MSV card is defective•

The preamplifier is defective•

The suppressor cable is faulty•

The MSV card is defective•

The preamplifier is defective•

The suppressor cable is faulty•

Signal MPKZH on MSV board is active. Cathode current is too high, I> 3.6 A.

•MSV is faulty.

•

Signal MPKZN on MSV board is active. Cathode current is too low, I >0.2 A.

•MSV is faulty.

W45 Emission for cathode 1 can Signal MSIBE on MSV board is not active. Emission for cathode 1 can not
not be switched on!
be switched on. UL1000 and UL1000 Fab switches to cathode 2. Plesae
order a new ion source.
W46 Emission for cathode 2 can Signal MSIBE on MSV board is not active. Emission for cathode 2 can not
can not be switched.
be switched on. UL1000 and UL1000 Fab switches to cathode 1. Order a
new ion source.
E47 Emission for both cathodes Signal MSIBE on MSV board is not active. Emission can not be switched
can not be switched on!
on. Exchange the cathode by changing the ion source. After having
exchanged the ion source it must be possible to switch on both cathodes
manually via the service menu.
E48 Anode heater is faulty!

Signal MSAFD on MSV board is active. Anode heater fuse has blown.
Replace fuse F2 on the MSV board.

E50 No communication with turbo Clock from the frequency converter has failed. No communication to thepump.
frequency converter.
E52 TMP frequency is too low!

•

TMP frequency is too low!

•

Frequency converter is faulty.

•

Turbomolecular pump is faulty.

W53 Temperature at electronic •unit is too high (>55°C)•

Ambient temperature too high.

•Ventilation failure.
Air filter dirty and have to be changed.

(2202)

E54 Temperatur at electronic unit • Ambient temperature is too high.
is too high (>60°C).

••

W55 Temperature at electronic •unit is too low (< 2°C)•
E56 Inlet pressure p1 too low!

Internal ventilation has failed.
Air filters are dirty and must be exchanged.
The temperature sensor on the wiring plane indicates T < 2 °C. Run-up
time for the forevacuum pump will be longer.
Temperature sensor is faulty.

U < 0,27 V; Cathode faulty.
Change thermovac-sensor that measures p1.

iina70en 08.fm

E58 Foreline pressure p2 too low! U < 0,27 V; Cathode faulty.
Change thermovac-sensor that measures p2.

Error And Warning Messages

95

Displayed Message

Description and possible solutions

E03 Suppressor test failed

W03 Supressor test failed•

The MSV card is defective•

The preamplifier is defective•

The suppressor cable is faulty•

The MSV card is defective•

The preamplifier is defective•

The suppressor cable is faulty

E60 p2 > 10 mbar after 5 minutes PV > 3.8 mbar after t > 5 minutes since switching on. Run-up time of thesince power on
forevacuum pump is too long.

E61 Emission fail.

•Forepump is faulty.

•

Valve V2 does not open.

technical handbook

No.

Emission should be switched on. MSV subassembly indicates a fault.
MENB emission current not within range.

W62 Flow through capillary to low. In the sniffer mode the intake pressure of the sniffer line is controlled. If thepressure falls below the minimum limit, the flow through the capillary is toolow (contamination) or the capillary is blocked (foreign objects, particles).
The minimum limit can be set by the menu. Default value is 0.1 mbar.
6.6.1.3.
W63 Capillary broken

In the sniffer mode the intake pressure of the sniffer line is controlled. If thepressure exceeds the maximum limit, the flow through the capillary is toohigh (no leak tightness, broken capillary).
The maximum limit can be set by the menu. Default value is 1.0 mbar.
6.6.1.3.

E73 Emission off (p2 too high)PV >> 0.2 or 3 mbar due to an inrush, e. g. The UL1000 and UL1000 Fabwill again try to resume the measurement mode.

W76 Maximum of evacuation time •was exeeded.
•

False adjustments of the max. time of evacuation.

The signal maximum has shifted to mass range alignment limits.
•

Signal of leak rate was instable during mass adjustment. Calibrate
again.

•

Check the basic setting for the anode voltage through the service
menu.

•

Check calibrated leak.

W78 Differences of signal between The amplifier voltage difference between opened and closed calibrated
test leak open and closed is leak is less than 10 mV. Calibrated leak has not been closed properly.
too low.

(2202)W77 Peak not in Range

Test sample has got a GROSS leak.

W79 Signal of test leak is too small Calibrated leak is too small or has not been opened. Preamplifier voltage< 10 mV.

96

calibrate

machine The automatic request of calibration is activated (7.2.1.1) and has fullfilled
at least one of the conditions:•

30 minutes are passed since energizing.

•

Temperature of the pre-amplifier has changed more than 5°C since thelast calibration.

•

Massadjustments were changed.

Error And Warning Messages

iina70en 08.fm

W80 Please
newly

No.

Displayed Message

technical handbook

E03 Suppressor test failed

W03 Supressor test failed

W81 CAL Factor too low

Description and possible solutions•

The MSV card is defective•

The preamplifier is defective•

The suppressor cable is faulty•

The MSV card is defective•

The preamplifier is defective•

The suppressor cable is faulty

The calculated factor falls out of the valid range (< 0,1). The old factor isretained.
Possible fault cause:

W82 CAL Factor too high•

The conditions for calibration have not been maintained.

•

The leak rate of the internal calibrated leak which was entered is much
too small.

•

The internal test leak is defect.

The calculated factor is out of the valid range (> 10). The old factor isretained.
Possible fault cause:•

The conditions for calibration have not been maintained.

•

The leak rate of the internal calibrated leak which was entered is much
too high or much too small.

•

The internal test leak is defect or empty.

W83 All EEPROM parameter lost. •Please check your settings.

EEPROM on back plane is empty and was initialized with default
valves. Enter all parameters again.

•

The EEPROM might be faulty when warning comes up again after
power up.

W85 Lost EEPROM parameter! •Please check your settings! •An update of software was done. In this case the notice can be ignored.
When warning comes up again after powering up the EEPROM might
be faulty.

W86 AC/DC factor too low

Calibration conditions not maintained
Value of leak rate not entered correctly
Test leak faulty

W87 AC/DC factor too highCalibration conditions not maintained
Value of leak rate not entered correctly
Test leak faulty

iina70en 08.fm(2202)•

Writting access was interrupted. Please check all adjustments.

Error And Warning Messages

97Maintenance Work

9.1

General Information
Service level II and III maintenance work on the UL1000/UL1000 Fab must only be
performed by personnel expressly authorised for this work by INFICON GmbH
Cologne.
Here note the corresponding service levels:•

Service level I

Customer•

Service level II

Customer with technical training•

Service level III

Authorised INFICON service technician

technical handbook

9

CautionPlease note the corresponding safety information in this chapter.

CautionDuring work on the vacuum system make sure that the work environment is clean
and always use clean tools.

STOP

DangerDuring all maintenance work on the UL1000 and UL1000 Fab be sure to disconnect
the leak detector from the mains power!
Complying with the maintenance plan given in the following is mandatory
for the UL1000 and UL1000 Fab. If the corresponding maintenanceintervals are not complied with, this will then void your warranty for thisequipment.

Signing a maintenance contract for this equipment is recommended.
As soon as the different maintenance intervals are reached, a warning is displayedon the screen of the leak detector of the UL1000 and UL1000 Fab each time it isswitched on. This message will remain on the display until the maintenance interval
has been acknowledged.

(2202)

Notice:iina70en 09.fm

Depending on the application the leak detector is used in, the 1500 hrs maintenancecan be varied.

98

Maintenance Work

9.2

Send in device for maintenance, repair or disposal

technical handbook

Warning
Danger due to harmful substances
Contaminated devices could endanger the health. The contamination declaration
serves to protect all persons who come into contact with the device.
Fill in the declaration of contamination completely.
•

Please do not hesitate to contact the manufacturer and send a completed
declaration of contamination before sending anything to us. You will then receivea return number.

•

Use the original packaging when returning.

•

Before sending the device, attach a copy of the completed contamination
declaration.

A copy of this form which you may copy is printed at the beginning of this manual.

9.3

Key to the Maintenance Plan•

I

Service level I

Customer•

II

Service level II

Customer with technical training•

III

Service level III

Authorised INFICON service technician•

X

Run maintenance work after operating hours or period of time•

X1

No time limitation, operating hours only•

X2

No operating hours limitation only period of time•

X3

Dependent on environmental influences, operating conditions, pollution andapplication process(2202)UL1000 only
As a preventive measure it is recommended to check in the case of the UL1000 once
per month the oil level and the colour of the oil of the rotary vane pump. The oilchange intervals for the oil of the D16B backing pump are recommendations andmay vary depending on the way in which the leak detector is used.
The pump has been specified for use in the leak detector UL1000 with Arctic Oil andmust for this reason be filled with Arctic Oil (Part No. 20099091) only.

iina70en 09.fm

When using any other kind of oil, INFICON GmbH Cologne must reject all warranty
claims relating to the backing pump.

Maintenance Work99

iina70en 09.fm

9.4(2202)

technical handbook

Maintenance Plan
Subassembly

Maintenance work
UL1000 / UL1000 FabOperating hours/years
1500

4000

8000

16000

24000

1/4

1

2

3

4

Servicelevel

Spare partnumberVacuum system
Backing pump D16 B

Check oil level, if required exchange

X

Exchange the oil

X3

I & II
X

II

Refurbish backing pump
Scroll pump Agilent

Exchange the tip seal

TS 620Exchange the scroll head

SplitFlow 80

Change the oil wick cartridge

X
X1
X
X3

Change bearings and replace oil wickcartridge
Valve block

X2

Clean the valves, replace valve seals

X3

Disassemble and clean the valve block

X3

Replace filter of vent and purge gas line

X3

Align Pirani gauge
Silencer UL1000 FabExhaust filter UL1000

X

Replace

X1

Check, empty

XIII

200001671

III

200001665R

II

200003801

III

III
X

20099091

III

200000594

III

200000593

X1

I, II ,III

200000683

X

III
I, II, III

20099183

I, II, III

Replace filter insert

X1

I, II, III

200000694

Maintenance WorkElectrical system
Fan subassemblies

Blow out fan chassis wall and bottom

X3

X1

I

Replace replacement filter cell for chassis
wall fan

X3

X1

I

200000685

100

9.5

Maintenance Groups

technical handbook

For better overview the maintenance plan for the UL1000 and UL1000 Fab/UL1000
can be subdivided in to 5 maintenance groups.

9.5.1

•

1500 hours maintenance•4000 hours maintenance, at least once a year•

8000 hours maintenance•

16000 hours maintenance•

24000 hours maintenanceNotes refering the maintenance of the SplitFlow 80
To lubricate the ball bearings, the turbo molecular pump SplitFlow 80 is filled with andoperating fluid. The operating fluid reservoir must be replaced together with thebearing after a period of 4 years, irrespective of the number of operating hours
reached by the turbopump.
The operating fluid reservoir should be replaced by an INFICON authorized personor service technican.
Under high load operating conditions or when used in connection with processes
involving contamination, shorter replacement intervals need to be selected.
If the turbopump should be shut down for longer than a year the operating fluid
reservoir must be changed first.
Replacement of the pump after 3 years is recommended for those customers, whomust guarantee a 100% uptime for the unit. In this case the turbopump SplitFlow 80
will be replaced by a refurbished pump.

9.5.2

Description of the Maintenance Work
Modifications to the UL1000 and UL1000 Fab/UL1000 which exceed the scope of
normal maintenance work must only be performed by trained personnel.

STOP

Danger(2202)The protective ground conductor distributor screw at the bottom of the chassis mustnot be loosened. If the protective ground conductor connection is not in place, theoperator will not be protected against electric shock.

9.5.3

Opening the Instrument for Maintenance Purposes

iina70en 09.fm

Required tools

Side wall separator (Plastic wedge) from the accessories.

Maintenance Work101

Danger

Before removing one of the covers of the UL1000 and UL1000 Fab the leak detector
must be disconnected from the mains power!
•

Vacuum components which are fitted to the inlet of the UL1000 and UL1000 Fabmust be disconnected from the inlet system.

•

As shown in Fig. 1-1, insert the side wall separator between cover and chassis
and press it down until the cover disengages. Press the cover on both sides outof the holder. Slightly fold the cover outwards and lift it out of the guide pins in thebottom of the instrument.

•

The correct position where to apply the side wall separator is marked by a dent
on both the covers. For this refer to Fig. 9-1/2.

•

Open both covers in the same way.

technical handbook

STOP

1

Fig. 9-1 Opening the UL1000 and UL1000 Fab
Item Description

1

2

Side wall separator

Dent in the side wall

Checking and Replacing the Filter Insert
The extent to which the air filter insert in front of the fans is contaminated should bechecked every three months (under aggravated conditions, monthly). Contaminatedfilter inserts must be exchanged since under such circumstances the cooling
performance for the turbomolecular pump and the instrument itself is reduced.

102

Maintenance Workiina70en 09.fm

9.6

Item Description(2202)

2

Required tools
Side wall separator from the accessories

technical handbook

Required material
Replacement filter insert P/N 200 000 685

STOPDanger

Before removing one of the covers of the UL1000 and UL1000 Fab the leak detector
must be disconnected from the mains power!
•

To open the leak detector, refer to Chapter 1.6.1•

Take hold of the filter insert with two fingers at the locations shown in Fig. 1-2/aand pull the filter insert out of the guide. Should this not be possible, use a tool topress the filter through the rear ejection bore Fig. 9-2/3 to the front.

1
a

2

3

iina70en 09.fm(2202)

aFig. 9-2 Replacement of the air filter in the chassis wall

Maintenance Work

103

•

Description
Air filter cut out
Air filter insert

9.7

Description
Air filter guide
Ejection bore (rear)

When inserting the new air filter insert, note the direction of the air flow. It is
indicated in the figure above Fig. 9-2 by a black arrow.

Notice:
•

Item
2
3

The side of the filter insert marked „clean air side" or the white surface ofthe filter insert must point in the direction of the fans.

Push the filter insert into the guide and place the covers back on. To close theinstrument, insert the covers and press these on.

technical handbook

Item
a
1

Replacing the Exhaust Silencer
Required material
Replacement silencer P/N 200 99 183•

Switch the UL1000 Fab leak detector off.

•

Unscrew the silencer from the connection adapter and replace it by the newsilencer and tighten it. For this refer to Fig. 9-3/1.

1

2(2202)

3
4
5

6

104

Item Designation

Item Designation

1

Silencer

4

Reducer2

Adapter for silencer

5

Centering ring DN 25

3

O-ring 20 x 3

6Clamping ring clip

Maintenance Workiina70en 09.fm

Fig. 9-3 Replacing the silencer

9.8

Checking/Emptying the Exhaust Filter
Required tools

technical handbook

Ring/open jaw spanner, size 17 mm
It is the task of the exhaust filter to filter out the oil mists which are produced whentaken in air is ejected during a pumpdown process. For safety reasons the exhaust
filter is equipped with a valve which in the case of a blocked filter opens and passes
the taken in air directly to the outside. This helps to prevent damage to the backing
pump by a blocked exhaust line.

STOP

DangerIn the case of a blocked exhaust filter, toxic oil vapours are directly emitted into theenvironment!
The condition of the exhaust filter should, for this reason, be checked in regularintervals. As soon as the oil level in the oil reservoir vessel reaches approximately
one third of the maximum filling quantity, the oil reservoir vessel needs to be emptied.
To empty the oil reservoir vessel proceed as follows:•

Switch the instrument off and remove the side covers. For this refer to Chapter
1.6.1.

STOP

Danger

Before removing one of the covers of the UL1000 and UL1000 Fab the leak detector
must be disconnected from the mains power!

(2202)

9.8.1•

Loosen the hexagon screw at the bottom of the reservoir vessel and drain the oil
into a suitable vessel. For this refer to Fig. 1-5/5. Dispose of the oil in accordancewith the local waste disposal regulations.

•

Screw in the hexagon screw again and tighten it.

•

Check the oil level of the D16 B rotary vane pump and top up oil as required.

Replacing the Filter Insert
Required tools
Side wall separator from accessories
Required material
Replacement filter insert: P/N 200 000 694 (10 pcs.)

iina70en 09.fm

The installation location for the exhaust filter is given in Fig. 9-4 below.

Maintenance Work105

technical handbook

1
2
3

4
5
6

Fig. 9-4 Installation location of the exhaust filter
1

Clamping ring KF 16

4

Maximum oil level mark2

Filter insert

5

Oil level viewing glass

3

Oil reservoir vessel

6

Maximum oil level markTo exchange the filter insert proceed as follows:

106•

Loosen the clamping ring at the exhaust filter (Fig. 9-4/1) and swivel the complete
filter in the direction of the arrow outwards to such an extent that the oil reservoir
vessel can be removed.

•

Turn out the oil reservoir vessel in the counter-clockwise direction and empty it.
Dispose of the oil in accordance with the local regulations. Clean the reservoir
vessel with a clean piece of cloth.

•

Manually loosen the filter holding screw Fig. 9-5/3, take out the filter insert andproperly dispose of it.

Maintenance Work

(2202)

Item Description

iina70en 09.fm

Item Description

technical handbook

1

2
4

3

5

Fig. 9-5 Filter insert exhaust filter(2202)

9.9

Item Description

Item Description

1

Filter cover4

Oil reservoir vessel

2

Filter insert

5

Oil drain plug3

Filter holder•

Push the new filter insert onto the holder and screw it into the filter cover.
Manually tighten the holder using the knurling.

•

Finally screw in the oil reservoir vessel and tighten it manually. Swivel the exhaust
filter back in and affix it with the KF16 clamping ring at its original installation
position.

Monitoring the Oil Level of the D16 B and Toppingup the Oil
As a preventive measure it is recommended to check the oil level and the colour ofthe pump oil once a month.
To open the instrument, observe the instructions given in Chapter 1.6.1.

STOP

Dangeriina70en 09.fm

Before removing one of the covers of the UL1000 and UL1000 Fab the leak detector
must be disconnected from the mains power!

Maintenance Work107

Required tools
Through the oil level viewing glass of the backing pump D16B the oil level and thecolour of the oil can be checked visually. The oil level of the vacuum pump must bewithin the minimum and maximum marks. For this refer to Fig. 9-6/3-5.
Notice:Check and top up oil only after the pump has been switched off!

technical handbook

Side wall separator

1
2
3
4

(2202)

5

Fig. 9-6 Oil change for the D16 B
Item
1
2
3

9.10

Item
4
5

Description
Oil level viewing glass
Minimum oil level markIf the oil level is below the minimum mark, top up oil. For this note the instructions
given in 9.10.

Oil Change for the D16B
The oil must be exchanged when it looks contaminated or is chemically ormechanically worn out.

108

Maintenance Workiina70en 09.fm•

Description
Oil fill opening
Oil drain plug
Maximum oil level marktechnical handbook

Further oil changes should be done before and after storing the pump for a longer
period of time.

CautionExchange the oil always while the vacuum pump is still warm and with the vacuum
pump switched off!

Required tools
Side wall separator
Hexagon socket screw key, size 5 mm; 8 mm
Open jaw spanner, size 13 mm
Required material
Artic oil 1 l.

P/N 200 99 091•

Switch the instrument off and remove the covers. To open the instrument,
observe the instructions given in 9.5.3.

•

Cut the cable straps for the oil drain hose and run the drain hose to the oilcollection vessel.

•

With a 5 mm hexagon socket screw key unscrew the oil drain plug at the hoseend. Use the 13 mm open jaw spanner for counteracting.

•

Drain the waste oil into a suitable vessel. As soon as the oil flow reduces, screw
the oil drain plug back in.

•

Switch the pump on briefly (10 s max.) and switch it off again. Remove the oil
drain plug again and let the remaining oil drain out.

Caution(2202)

Oil may damage the environment! For this reason dispose of it properly and in linewith the applicable environment regulations.
•

Screw the oil drain plug back in again. Check the gasket and replace it if required.
Affix the oil drain hose with a cable strap again.

•

Unscrew oil fill plug Fig. 9-6/1 from the oil fill opening and top up fresh oil up to
the maximum level. The maximum amount of oil is 0.8 litres.

•

Screw the oil fill plug back in again and tighten it.
After starting up, the fresh oil should be degassed. For this let the leakdetector operate in the „STANDBY“ mode and leave the gas ballast open
for approximately 20 minutes.

iina70en 09.fm

Notice:Maintenance Work109

Scroll Pumps (UL1000 and UL1000 Fab only)
The maintenance intervals of themaintenance plan detailed in 9.4.

scroll pump (Agilent TS620) is given in theiina70en 09.fm(2202)We recommend to have this maintenance work done by the INFICON Service or aservice partner authorised by INFICON.

technical handbook

9.11

110

Maintenance Work

Declaration of Conformity

iina70en 10.fm(2202)

technical handbook

10

Declaration of Conformity

111

iina70enSIX.fm

1,0E-04
1,500

1,0E-03

1,0E-02

1,0E-01

1,0E+00

1,0E+01

1,0E+02

1,0E+03(2202)

2,500

3,500

4,500
U [V]

5,500

6,500

TPR265-characteristic (P1, P2; recorder-exit)

7,500

8,500

technical handbook

A
DiagramFig. 11-1

Diagram112

pressure [mbar]

113

Diagramiina70enSIX.fm(2202)

technical handbook

Indextechnical handbook

A
Access Control
Accessories

85
61

Ambient temperature

15

Audio alarm

15

Automatic Internal Calibration

87

55

Background in Standby

55

built-in leak standard

86

C
Calibration

63

calibration

33

contract• maintenance and service

10

contrast

54

Control Panel

39

14

Digital In

28

Digital Out

26–27

Dimensions

15(2202)

Helium leak rate

14

Humidity

15

I CAL

78

INFICON Service

12

information

83

Inlet area background suppression

71

Inlet Port

31

Inlet port

14

Inlet pressure

14

Installation

20

Ion source

14

ion source

38

language77

Leak rate

14

loud speaker48

Machine factor

67

maintenance contract

10

Manual Internal Calibration

87

M

E
Electrical Connections

24

Mass spectrometer

14

Exhaust31

mass spectrometer

38

exhaust filter

77

Measurement range

14

external calibration

87

MENU

39

Mode
• Sniffer• Vacuum

14
14

Noise level

15

F

iina70enSIX.fm

26, 30L

D
Detectable masses

Hand Set

I

B
background

43

H

26–27

alarm

GROSS

FINE

43

FINE only

66

G
Gas ballast

N

31

Index

114

Pinpoint

62

Power
• consumption

15

pressure39
26, 31

Purge

Trigger48

Trigger alarm

62

turbo pump43

turbomolecular pump

38

U

Purging

47

ULTRA

43

Purpose12

ULTRA only

66

Vacuum Diagramm

38

Vacuum mode

14

Valves15

technical handbook

P

V

Q
44

QT100

R
Recorder26, 30

Relay Output

59

RS232

26

run-up mode46

Run-up time

14

Vent

26, 31volume60

Weight15

W

Safety Symbols

7

Zero

71

scroll pump

43

ZERO Button

35

Service Center

12

service contract

10

Setpoint

62

sniff mode

44

sniffer line

37, 44

Sniffer mode

14

START Button

34

Startup

33

STOP Button

35

Storage temperature

15

Temperature• ambient• storage

15
15

time axis

49

Time&Date

77

Transportation

20

trend mode

49

(2202)

Z

S

115

Index

iina70enSIX.fm

TIndex116

iina70enSIX.fm(2202)

technical handbook