Communication Protocol

EtherCAT®
for Pirani Capacitance Diaphragm and Pirani Standard Gauges

PCG550, PCG552, PCG554,
PSG550, PSG552, PSG554

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1General Information

CautionCaution: data transmission errors
Any attempt to simultaneously operate the gauge via the RS232C
Serial Interface and EtherCAT interface or the diagnostic port may
result in incorrect data and data transmission errors.
Therefore, it is inadmissible to simultaneously operate the gauge via
the RS232C Serial Interface and EtherCAT interface, or the diagnostic
port.

Intended Use

This Communication Protocol contains instructions for operating EtherCAT interfaces (slaves) together with a master.
For safety information, specifications and operation instructions of thevacuum gauges refer to the appropriate documents (→  [1], [2]).

EtherCAT–Interface

The following description of the EtherCAT interface is compliant to the EtherCAT
specification of the EtherCAT Technology Group (ETG) and to the  "EtherCAT
Semiconductor Device Profile".
This manual describes the functionality of a EtherCAT slave and supports•

ETG.5003.1 S (R) V1.0.0 : Part 1 Common Device Profile (CDP) (→  [11])and•ETG.5003.2080 S (R) V1.0.0 : Part 2080: Specific Device Profile (SDP):
Vacuum Pressure Gauge (→  [12]).

We reserve the right to make technical changes without prior notice.

Product Identification

In all communications with INFICON, please specify the information on the productnameplate. For convenient reference copy that information into the space provided
below.

INFICON AG, LI-9496 Balzers

2

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Validity

This document applies to products of the Pirani Capacitance Diaphragm (PCG550,
PCG552, PCG554) and Pirani Standard Gauges (PSG550, PSG552, PSG554) with
EtherCAT interface.
This manual is based on firmware version 1.2.0.0.
If your unit does not work as described in this document, please check that it isequipped with the above firmware version (→  12 Index: 0x100A Subindex: 0x00).
Part numbers of standard products are indicated below. OEM products have otherpart numbers and different parameter settings (e.g. factory setting of setpoint) as
defined in the corresponding ordering information.

3Pxx-0xx-xx8x
Measuring signal

Receptacle

Display Switching function

0  0.61 ... 10.23 V1  1.2 ... 8.68 V
2  0.375 ... 5.659 V
3  1.57 ... 9.05 V
0  FCC1  D-Sub, 9-pin
2  D-Sub, 15-pin HD
4  D-Sub, 15-pin HD, RS485 INF
0  None1  Display
2  2 switching functions *)3  ATM sensor &2 switching functions *)4  Display & 2 switching functions *)5  Display & ATM sensor &2 switching functions *)6  2 switching functions **)Flange 1

 DN 16 ISO-KF
2  DN 16 ISO-KF long tube
4  DN 16 CF-F
5  DN 16 CF-R long tube
6  DN 25 ISO-KF
D  4 VCR female
E  8 VCR femaleF  1/8" NPTK  Flange 29×29 mm
M  4 VCR female 90°
N  7/16-20 UNF male

Unit 0  mbar
1  Torr
2  Pa3  micron

Filament

1  Tungsten
2  Nickel
3  Ceramic coated6  Tungsten, galvanically isolated
7  Nickel, galvanically isolated
8  Ceramic coated, galvanically isolated

Product family

C  Pirani Capacitance Diaphragm Gauge
I  Pirani Standard Gauge*) Solid state relay**) Electromechanical relay

The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations in this document
correspond to PCG550 gauges with the DN 16 ISO-KF vacuum connection. They
apply to other vacuum connections and to the other gauges by analogy.
We reserve the right to make technical changes without prior notice.

Trademarktira85e1-a(2014-10)

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EtherCAT®

Beckhoff Automation GmbH, Deutschland

3Patents

4

EP 0689669 B1, 0689670 B1, 0658755 B1
US Patents 5608168, 4031997, 5583297

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Contents

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General Information
Intended Use
EtherCAT–Interface
Product Identification
Validity
TrademarkPatents

2
2
2
2
3
3
4

Contents

5

1 Technical Data

7

2 Interface Connection

9

3 Operation
3.1 Introduction
3.2 Front View
3.3 Indicators and Switches
3.3.1 <RUN> LED
3.3.2 <ERR> LED
3.3.3 <LA> LED (<IN> Port)
3.3.4 <LA> LED (<OUT> Port)
3.3.5 Device Address Switch

10
10
10
11
11
11
11
11
12

4 Object Structure
4.1 Object Dictionary structure
4.2 Communication Profile Objects (0x1000…0x1FFF)
4.2.1 Process Data Objects (PDO's)
4.3 Manufacturer-specific Profile Objects (0x2000...0x5FFF)
4.3.1 Manufacturer Configuration Module 1
4.3.2 Manufacturer Configuration Module 2 (PCG with or without ATM only)
4.3.3 Manufacturer Configuration Module 3 (PCG with ATM only)
4.4 Input Area PCG with ATM (0x6000…0x6FFF)
4.4.1 Input Common
4.4.2 Input Capacitance Diaphragm
4.4.3 Input Common
4.4.4 Input Piezo
4.4.5 Input Common
4.4.6 Input Heat Transfer
4.4.7 Input Trip Point 1
4.4.8 Input Trip Point 2
4.5 Input Area PCG without ATM (0x6000…0x6FFF)
4.5.1 Input Common
4.5.2 Input Capacitance Diaphragm
4.5.3 Input Common
4.5.4 Input Heat Transfer
4.5.5 Input Trip Point 1
4.5.6 Input Trip Point 2
4.6 Input Area PSG (0x6000…0x6FFF)
4.6.1 Input Common
4.6.2 Input Heat Transfer
4.6.3 Input Trip Point 1
4.6.4 Input Trip Point 2
4.7 PCG with ATM Configuration Area (0x8000…0x8FFF)
4.7.1 Configuration Common Module
4.7.2 Configuration Capacitance Diaphragm
4.7.3 Configuration Trip Point 1
4.7.4 Configuration Trip Point 2
4.8 PCG without ATM, Configuration Area (0x8000…0x8FFF)
4.8.1 Configuration Common Module
4.8.2 Configuration Capacitance Diaphragm
4.8.3 Configuration Trip Point 1
4.8.4 Configuration Trip Point 2
4.9 PSG Configuration Area (0x8000…0x8FFF)
4.9.1 Configuration Trip Point 1
4.9.2 Configuration Trip Point 2
4.10 PCG with ATM Information Area (0x9000…0x9FFF)
4.10.1 Information Capacitance Diaphragm
4.10.2 Information Common

13
13
14
15
16
16
16
17
17
17
17
18
18
19
19
19
20
20
20
20
21
21
21
22
22
22
22
23
23
23
23
24
24
26
27
27
27
27
29
30
30
31
33
34
34
5

4.10.3 Information Piezo
4.10.4 Information Common
4.10.5 Information Heat Transfer
4.10.6 Information Trip Point 1/2
4.11 PCG without ATM, Information Area (0x9000…0x9FFF)
4.11.1 Information Capacitance Diaphragm
4.11.2 Information Common
4.11.3 Information Heat Transfer
4.11.4 Information Trip Point 1/2
4.12 PSG Information Area (0x9000…0x9FFF)
4.12.1 Information Common
4.12.2 Information Heat Transfer
4.12.3 Information Trip Point 1/2
4.13 Device Area (0xF000...0xAFFF)
4.13.1 Semiconductor Device Profile
4.13.2 PCG with ATM Module Profile List
4.13.3 PCG without ATM, Module Profile List
4.13.4 PSG Module Profile List
4.14 Exceptions
4.14.1 Active Exception Status
4.14.2 PCG with ATM Active Device Warning Details
4.14.3 PCG without ATM, Active Device Warning Details
4.14.4 PSG Active Device Warning Details
4.14.5 PCG with ATM Active Device Error Details
4.14.6 PCG without ATM, Active Device Error Details
4.14.7 PSG Active Device Error Details
4.14.8 PCG with ATM Latched Device Warning Details
4.14.9 PCG without ATM, Latched Device Warning Details
4.14.10
PSG Latched Device Warning Details
4.14.11
PCG with ATM Latched Device Error Details
4.14.12
PCG without ATM, Latched Device Error Details
4.14.13
PSG Latched Device Error Details
4.14.14
PCG with ATM Device Warning Mask
4.14.15
PCG without ATM, Device Warning Mask
4.14.16
PSG Device Warning Mask
4.14.17
PCG with ATM Device Error Mask
4.14.18
PCG without ATM Device Error Mask
4.14.19
PSG Device Error Mask
4.15 Manufacturer-device specific Profile Objects (0xF500...0xF5FF)
4.15.1 Manufacturer Device Information
4.16 Gauge General
4.16.1 Combination Gauge
4.16.2 Trip Point Output All
4.16.3 Input Latch Local Timestamp
4.17 Configure Device
4.18 Information
4.18.1 PCG with ATM Information Device
4.18.2 PCG without ATM, Information Device
4.18.3 PSG Information Device
4.19 Adjust and Reset
4.19.1 Command Zero Adjust
4.19.2 Full Scale Adjust
4.19.3 Device Reset Command
4.19.4 Exception Reset Command
4.19.5 Store Parameters Command

34
34
35
35
36
36
37
37
37
38
38
39
39
39
39
39
40
40
40
40
40
41
42
42
43
44
44
45
45
45
46
46
47
47
47
48
48
48
49
49
50
50
50
51
51
52
52
53
53
54
54
55
55
56
57

Appendix
A: Literature

58
58

For cross-references within this document, the symbol (→  XY) is used, for crossreferences to further documents, listed under literature, the symbol (→  [Z]).

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1 Technical Data

Further technical data →  [1], [2].

EtherCAT interface

Communication protocol
Communication standards

Data rate
Node address
Physical layer
EtherCAT connector

Cable
Cable length
Process data
Mailbox (CoE)

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protocol specialized for EtherCAT
ETG.5003.1: Part 1 Common Device Profile(CDP) (→  [11])ETG.5003.2080: Part 2080 Specific Device
Profile (SDP): Vacuum Pressure Gauge(→  [12])100 Mbps
Explicit Device Identification
100BASE-Tx (IEEE 802.3)
2 × RJ45, 8-pin (socket)<IN>:
EtherCAT input<OUT>: EtherCAT output
special Ethernet Patch Cable (CAT5e quality
or higher), shielded≤100 mFixed PDO mapping and configurable PDO
mapping
SDO requests, responses and information

7

≈65

Dimensions [mm]67
24 6 24 6 24 6
ERR 0
80
80
8 RUN
E A E A E A
x100
x10
x1
LA

OUT

56

IN

87.5

LA

I/O
ST
DIA

SP2

SP1

DN 25 ISO-KF

46.3

42.7

36

21.5

ADJ

1/8" NPT

34

4 VCR

8 VCR

DN 16 CF-R long(2014-10)

130.2

DN 16 CF-F

30.9
130.8

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31.5

7/16-20 UNF

DN 16 ISO-KF long

36.5

DN 16 ISO-KF

14.5

29.2×29.2 mm

24.4
4-VCR 90°

8PxG55x.cp

2 Interface Connection
Making an EtherCAT interface
cable

For operating the Pirani Standard (PSG55x) or Pirani Capacitance Diaphragm(PCG55x) Gauge via EtherCAT, two interface cables conforming to the EtherCAT
standard are required.
If no such cables are available, make two according to the following indications.

Cable type

Ethernet Patch Cable (CAT5e quality) with FCC68 connector.

Procedure Pin assignment:
FCC68, 8-pin,male, soldering side

8

1

Pin

SignalDescription

1
2
3
4
5
6
7
8

TD+
TDRD+
nu
nu
RDnu
nu

Transmission Data +Transmission Data Receive Data +not used
not used
Receive Data not used
not used

Pin assignment of the D-Sub 15-pin sensor connector according to therespective operating manual (→  [1], [2]).

 Plug the EtherCAT (and sensor) cables connector into the gauge: From theprevious device the cable connected to OUT port has to be connected to the
PxG55x <IN> port. And the cable from the PxG55x <OUT> port has to beconnected to the next device's <IN> port.

FCC68 cable<IN> port

FCC68 cable<OUT> port

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93 Operation
3.1 Introduction

Via the EtherCAT interface, the following and further data are exchanged in thestandardized EtherCAT protocol:•

Pressure reading•

Pressure unit (Torr, mbar, Pa)•

Zero adjustment•

Status and error messages•

Status of the switching functions•

Set Trip Point for switching functions

CautionCaution: data transmission errors
Any attempt to simultaneously operate the gauge via the RS232C
Serial Interface and EtherCAT interface or the diagnostic port may
result in incorrect data and data transmission errors.
Therefore, it is inadmissible to simultaneously operate the gauge via
the RS232C Serial Interface and EtherCAT interface or the diagnostic
port.

3.2 Front View

6

7

5

8

9
10

4
3
2
1

Position

10

Label

Function

1

IN

EtherCAT IN connector

2

ERR

Error LED

3x100

Address Switch × 100, hexadecimal

4

LA

Link activity EtherCAT IN

5x10

Address Switch × 10, hexadecimal

6

x1

Address Switch × 1, hexadecimal

7

RUN

EtherCAT Status LED

8

LA

Link activity EtherCAT OUT

9OUT

EtherCAT OUT connector

10

PWR

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3.3 Indicators and Switches

3.3.1 <RUN> LED

Displays the operating status.

RUN

Color

LED Stateoffblinking

Description
INIT (initialization status) or no power applied to device.
PREOP (pre-operational status).

(200 ms on
200 ms off)green

single flash(200 ms on1000 ms off)on

3.3.2 <ERR> LED

SAFEOP (safe-operational status).
Communication of cyclic data transfer running. Input values
available, output values written to the device but not
updated on device output.
OP (operational status).

Displays the error content.

ERR

Color

LED State

Descriptionoff

No error or no power applied to device.

blinking

Error occurred (see error parameter).

(200 ms on
200 ms off)

single flash
red(200 ms on1000 ms off)

double flash(200 ms on
200 ms off
200 ms on
1000 ms off)on

3.3.3 <LA> LED (<IN> Port)
LA

LA

OUT

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Color
green

3.3.4 <LA> LED (<OUT> Port)

PxG55x.cp

An application watchdog timeout has occurred.
Sync Manager Watchdog timeout or communication
timeout occurred.
A critical communication or application controller error has
occurred. Application controller is not responding any more
(PDI Watchdog Timeout detected by ESC)

Displays the input status.
LED StateoffIN

Slave device application has changed the EtherCAT state
autonomously, due to local error (see error parameter).

Description
Port not connected or no power applied to device.

blinking

Port connected and communication active.

onPort not connected but no communication.

Displays the output status.
Color

LED State

green

blinking

Port connected and communication active.

onPort not connected but no communication.

off

Description
Port not connected or no power applied to device.

11

3.3.5 Device Address Switch
x100
x10
24 6
2 4 6
0
8 0
8
E A
E A

12

x1
2 4 6
0
8
E A

During device initialization, the device address switches are read by the device
firmware. This device address is supported to the master as Explicit Device
Identification.
Example: Value of the Explicit Device ID = 0xDDD (dec 3549):
0x100 * 0xD (dec 3328) + 0x10 * 0xD (dec 208) + 0x1 * 0xD (dec 13)

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4 Object StructureThis chapter describes the CANopen over EtherCAT (CoE) Object Dictionary.

4.1 Object Dictionary
structure

The objects in the CoE Object Dictionary can be accessed with SDO services, andmany of the dictionary objects can be mapped for cyclic communication in PDOs.
Each object is addressed using a 16-bit index and an 8-bit subindex.
The following table presents the overall layout of the standard Object Dictionary.
Index (hex.)

Object dictionary area

1000 – 1FFF

Communication profile area

2000 – 5FFF

Manufacturer-specific profile area
Input area

7000 – 7FFF

Output area

8000 – 8FFF
9000 – 9FFF
A000 – AFFF
B000 – BFFF
C000 – EFFF
F000 – FFFF

Profile Specific Area

6000 – 6FFF

Configuration area
Information area
Diagnosis area
Service Transfer area
Reserved area
Device area

Explanations for the abbreviations in the columns of the tables are given below:
Abbr.

Description

Access

SDO read/write access(2014-10)

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RO: object can only be read by the SDO service•

RW: object can be both read and written by the SDO service

CoE

CAN application protocol over EtherCAT

Index

Object Index (hex.) (address of an object)

NV

Nonvolatile; attribute value is maintained through power cycles

ObjectAbstract representation of a particular component within a device,
which consists of data, parameters, and methods.

PDO

Process Data Object. Structure described by mapping parameters
containing one or several process data entities.

PM

PDO mapping•

Rx: object can be mapped into an Rx PDO•

Tx : object can be mapped into a Tx PDO

RxPDO

Receive PDO. A Process Data Object received by an EtherCAT slave.

SDO

Service Data Objects. CoE asynchronous mailbox communications
where all objects in the Object Dictionary can be read and written.

SI

Subindex (hex.) (sub-address of an object)

Type

Data TypeTxPDO

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BOOL, BIT = 1 bit. Boolean (0 = false, 1 = true)•

USINT, BYTE = 8 bit. Unsigned Byte•

UINT = 16 bit. Unsigned integer value•

UDINT = 32 bit. Unsigned integer value•

ULINT = 64 bit. Unsigned integer value•

REAL = 32 bit. Floating point•

V_STRING = 8×n bit. Visible string (1 byte for character)Transmit PDO. A Process Data Object sent from an EtherCAT slave.

134.2 Communication Profile
Objects(0x1000…0x1FFF)

The objects of the communication profile describe the basic EtherCAT properties of
the PxG55x and are common to all EtherCAT slaves using the CoE communication
protocol. The objects are described in following table:
Index

SI

DataType

NV

AccessPM Name

1000

UDINT

RO

Device Type

1008

V_STRINGRO

Manufacturer Device name

1009

V_STRINGRO

Manufacturer Hardware
Version

100A

V_STRINGRO

Manufacturer Software
VersionUDINT

RWStore Parameters
Read:
Bit 0 = 1: slave saves the
backup entries whenwriting 0x1010:01 with
0x65766173

1010

0x01

Bit 1 = 1: slave saves the
backup entries automatically when they are written
Bit 2-31 = 0
Write:
With the value
0x65766173 the backup
entries will be stored to
non-volatile memory of the
slave
1011

0x01

UDINT

RW

RO

Identity Object

0x01

UDINT

RO

Vendor ID

1018

10F8

14

Restore Default
Parameters
Read:
Bit 0 = 1: slave supports
the restoring of backup
entries with the default
values when writing
0x1011:01 with
0x64616F6C
Bit 1-31 = 0
Write:
With the value
0x64616F6C the backup
entries will be restored withthe default values

0x02

UDINT

RO

Product Code

0x03

UDINT

RO

Revision Number

0x04

UDINT

RO

Serial Number

ULINT

RO

Timestamp Object

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4.2.1 Process Data Objects(PDO's)•PSG gauges: They consist of one vacuum pressure sensor.

•

PCG gauges with or without ATM: They consist of two vacuum pressure
sensors. The characteristic of this combi device is that only one vacuum
pressure sensor outputs an actual pressure value at one time. The other sensor
is in overrange condition which means that the pressure is higher than themeasurement range of the sensor or underrange condition which means thatthe pressure is lower than the measurement of the sensor. The 'Combination
Gauge Active Value' outputs the pressure value form the active measuring
sensor.
For each sensor module a default mapping is configured. The mapping for eachsensor module has the same contents. For a compact cyclic data frame
duplicated mappings can be deactivated.

Or to meet other requirements the TxPDO’s 1A01, 1A03 or 1A05 and the RxPDO
1601 are designated for user mapping. These PDO’s do not have default values
and can be set up by the PDO configuration.

RxPDO’s

TxPDO’s PSG

Index

SI

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PM NameRxPDO Receive PDO
Mapping,

1601

PM

RW

RxPDO Receive PDO
Mapping, User Mapping

Index

Index

SI

DataType

NV

PM

AccessRW

PM NameTxPDO Transmit PDO
Mapping

0x01

BIT

Reading Valid

0x02

BIT

Overrange Exceeded

0x03

BIT

Underrange Exceeded

0x04

BIT

Padding Bits 1 (5 bit)

0x05

REAL

Sensor Value

0x06

UDINT

Trip Point Output All
Instance

PM

SI

1A00
or 1A02
or 1A04

1A01
or 1A03
or 1A05(2014-10)

AccessRW

1A01

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NV

PM

1A00

TxPDO’s PCG(PCG with or without ATM
only)

DataType

1600

DataType
PM

RW

NV

AccessRW

TxPDO Transmit PDO
Mapping, User Mapping

PM NameTxPDO Transmit PDO
Mapping

0x01

BIT

Combination Gauge
Reading Valid

0x02

BIT

Combination Gauge
Overrange Exceeded

0x03

BIT

Combination Gauge
Underrange Exceeded

0x04

BIT

Padding Bits 1 (5 bit)

0x05

REAL

Combination Gauge Active
Value

0x06

UDINT

Trip Point Output ALL
InstancePM

RW

TxPDO Transmit PDO
Mapping, User Mapping

15

Sync Manager

Index

SI

DataType

NV

AccessPM Name

1C00

0x01
0x02
0x03
0x04

BYTE

RW

Sync Manager Type

1C12 /
1C13

0x01
0x02
0x03
0x04

UINT

RW

Sync Manager PDO
Assignment

1C32 /
1C33

0x01
0x20

RW

Sync Manager Parameter

4.3 Manufacturer-specific
Profile Objects(0x2000...0x5FFF)

The manufacturer-specific profile objects contain the manufacturer's model number
and device configuration data, status and diagnostic data. The objects aredescribed in the following tables.

4.3.1 Manufacturer
Configuration Module 1•

PCG gauges with or without ATM: The "Manufacturer Configuration Module 1"
is assigned to the CDG module.

•

PSG gauges: The "Manufacturer Configuration Module 1" is assigned to the
Pirani module.

Subindex 0x01

Index

SI

DataType

NV

AccessPM Name

4000

0x01

BYTE

RW

Safe State

0x02

REAL

RW

Safe Value

Specifies the behavior for the value for States other than Valid.
Safe State
01
2
3

Subindex 0x02

4.3.2 Manufacturer
Configuration Module 2(PCG with or without
ATM only)

Subindex 0x01

Zero
Full Scale
Hold last value
Use safe value

Safe Value: The value to be used for Safe State = Safe Value.

•

PCG gauges with ATM: The "Manufacturer Configuration Module 2" is assigned
to the ATM module.

•

PCG gauges without ATM: The "Manufacturer Configuration Module 2" isassigned to the Pirani module.

Index

SI

DataType

4010

0x01

BYTE

NV

AccessRW

PM Name
Safe State

0x02

REAL

RW

Safe Value

Specifies the behavior for the Value for states other than Valid.
Safe State
0
1
2
3

16

Zero
Full Scale
Hold last value
Use safe value

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Subindex 0x02

4.3.3 Manufacturer
Configuration Module 3(PCG with ATM only)

Safe Value: The value to be used for Safe State = Safe Value.

•

PCG gauges with ATM: The "Manufacturer Configuration Module 3" is assigned
to the Pirani module.

Index

SI

4020

Subindex 0x01

DataType

NV

AccessPM Name

0x01

BYTE

RW

Safe State

0x02

REAL

RW

Safe Value

Specifies the behavior for the Value for states other than Valid.
Safe State
01
2
3

Subindex 0x02

Zero
Full Scale
Hold last value
Use safe value

Safe Value: The value to be used for Safe State = Safe Value.

4.4 Input Area PCG with
ATM (0x6000…0x6FFF)
4.4.1 Input Common

Index
6000

Subindex 0x0E

SI

DataType

NV

AccessPM Name

0x0E

BOOL

RO

tx

TxPdoState

0x11

REAL

RO

tx

Sensor Value

Is set if the device is not in Safe State (value (I 0x6nn0, SI 0x11) = valid)
TxPdoState
0
1

Subindex 0x11

4.4.2 Input Capacitance
Diaphragm

Subindex 0x01

Invalid
Valid

The corrected, converted, calibrated final analog input value of the sensor.

Index
6001

SI

DataType

NV

AccessPM Name

0x01

BOOL

RO

tx

Reading Valid

0x02

BOOL

RO

tx

Overrange Exceeded

0x03

BOOL

RO

tx

Underrange Exceeded

Indicates whether the Value parameter contains a valid value within the specified
accuracy or not.
Reading Validtira85e1-a(2014-10)

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0Invalid

1

Valid

17

Subindex 0x02

Indicates whether the Value parameter contains a value in over range.
Reading Valid

Subindex 0x03

0

No Overrange Exceeded1Overrange Exceeded

Indicates whether the Value parameter contains a value in under range.
Reading Valid

4.4.3 Input Common

0

No Underrange Exceeded1

Underrange Exceeded

Index
6010

Subindex 0x0E

SI

DataType

NV

AccessPM Name

0x0E

BOOL

RO

tx

TxPdoState

0x11

REAL

RO

tx

Sensor Value

Is set if the device is not in Safe State (value (I 0x6nn0, SI 0x11) = valid)
TxPdoState
0
1

Subindex 0x11

4.4.4 Input Piezo

The corrected, converted, calibrated final analog input value of the sensor.

Index
6012

Subindex 0x01

Invalid
Valid

SI

DataType

NV

AccessPM Name

0x01

BOOL

RO

tx

Reading Valid

0x02

BOOL

RO

tx

Overrange Exceeded

0x03

BOOL

RO

tx

Underrange Exceeded

Indicates whether the Value parameter contains a valid value within the specified
accuracy or not.
Reading Valid

Subindex 0x02

0Invalid

1

Valid

Indicates whether the Value parameter contains a value in over range.
Reading Valid

Subindex 0x03

0

No Overrange Exceeded1Overrange Exceeded

Indicates whether the Value parameter contains a value in under range.
Reading Valid

18

0

No Underrange Exceeded1

Underrange Exceeded

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4.4.5 Input Common

Subindex 0x0E

Index

SI

DataType

6020

0x0E
0x11

NV

AccessPM Name

BOOL

RO

tx

TxPdoState

REAL

RO

tx

Sensor Value

Is set if the device is not in Safe State (value (I 0x6nn0, SI 0x11) = valid)
TxPdoState
0
1

Subindex 0x11

4.4.6 Input Heat Transfer

Subindex 0x01

Invalid
Valid

The corrected, converted, calibrated final analog input value of the sensor.

Index

SI

DataType

6023

0x01

BOOL

NV

AccessPM NameRO

tx

Reading Valid

0x02

BOOL

RO

tx

Overrange Exceeded

0x03

BOOL

RO

tx

Underrange Exceeded

Indicates whether the Value parameter contains a valid value within the specified
accuracy or not.
Reading Valid

Subindex 0x02

0Invalid

1

Valid

Indicates whether the Value parameter contains a value in over range.
Reading Valid

Subindex 0x03

0

No Overrange Exceeded1Overrange Exceeded

Indicates whether the Value parameter contains a value in under range.
Reading Valid

4.4.7 Input Trip Point 1

Subindex 0x01

0

No Underrange Exceeded1

Underrange Exceeded

Index

SI

DataType

AccessPM Name

600E

0x01

BOOL

RO

tx

Status High Trip

0x02

BOOL

RO

tx

Status Low Trip

Status High Trip
01

Subindex 0x02

(2014-10)

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High Trip not assert
High Trip assert

Status Low Trip
01

tira85e1-a

NV

Low Trip not assert
Low Trip assert

194.4.8 Input Trip Point 2

Subindex 0x01

Index

SI

DataType

600F

0x01
0x02

AccessPM Name

BOOL

RO

tx

Status High Trip

BOOL

RO

tx

Status Low Trip

Status High Trip
01

Subindex 0x02

NV

High Trip not assert
High Trip assert

Status Low Trip
0
1

Low Trip not assert
Low Trip assert

4.5 Input Area PCG without
ATM (0x6000…0x6FFF)
4.5.1 Input Common

Subindex 0x0E

Index

SI

DataType

AccessPM Name

6000

0x0E

BOOL

NV

RO

tx

TxPdoState

0x11

REAL

RO

tx

Sensor Value

Is set if the device is not in Safe State (value (I 0x6nn0, SI 0x11) = valid)
TxPdoState
0
1

Subindex 0x11

4.5.2 Input Capacitance
Diaphragm

Subindex 0x01

Invalid
Valid

The corrected, converted, calibrated final analog input value of the sensor.

Index

SI

DataType

6001

0x01

BOOL

NV

AccessPM NameRO

tx

Reading Valid

0x02

BOOL

RO

tx

Overrange Exceeded

0x03

BOOL

RO

tx

Underrange Exceeded

Indicates whether the Value parameter contains a valid value within the specified
accuracy or not.
Reading Valid

Subindex 0x02

0Invalid

1

Valid

Indicates whether the Value parameter contains a value in over range.
Reading Valid

Subindex 0x03

0

No Overrange Exceeded1Overrange Exceeded

Indicates whether the Value parameter contains a value in under range.
Reading Valid20

0

No Underrange Exceeded1

Underrange Exceeded

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4.5.3 Input Common

Subindex 0x0E

Index

SI

DataType

6010

0x0E
0x11

NV

AccessPM Name

BOOL

RO

tx

TxPdoState

REAL

RO

tx

Sensor Value

Is set if the device is not in Safe State (value (I 0x6nn0, SI 0x11) = valid)
TxPdoState
0
1

Subindex 0x11

4.5.4 Input Heat Transfer

Subindex 0x01

Invalid
Valid

The corrected, converted, calibrated final analog input value of the sensor.

Index

SI

DataType

6013

0x01

BOOL

NV

AccessPM NameRO

tx

Reading Valid

0x02

BOOL

RO

tx

Overrange Exceeded

0x03

BOOL

RO

tx

Underrange Exceeded

Indicates whether the Value parameter contains a valid value within the specified
accuracy or not.
Reading Valid

Subindex 0x02

0Invalid

1

Valid

Indicates whether the Value parameter contains a value in over range.
Reading Valid

Subindex 0x03

0

No Overrange Exceeded1Overrange Exceeded

Indicates whether the Value parameter contains a value in under range.
Reading Valid

4.5.5 Input Trip Point 1

0

No Underrange Exceeded1

Underrange Exceeded

Index
600E

Subindex 0x01

(2014-10)

PxG55x.cp

NV

AccessPM Name

0x01

BOOL

RO

tx

Status High Trip

0x02

BOOL

RO

tx

Status Low Trip

High Trip not assert
High Trip assert

Status Low Trip
01

tira85e1-a

DataType

Status High Trip
01

Subindex 0x02

SI

Low Trip not assert
Low Trip assert

21

4.5.6 Input Trip Point 2

Subindex 0x01

Index

SI

DataType

600F

0x01
0x02

AccessPM Name

BOOL

RO

tx

Status High Trip

BOOL

RO

tx

Status Low Trip

AccessPM Name

Status High Trip
01

Subindex 0x02

NV

High Trip not assert
High Trip assert

Status Low Trip
0
1

Low Trip not assert
Low Trip assert

4.6 Input Area PSG(0x6000…0x6FFF)
4.6.1 Input Common

Subindex 0x0E

Index

SI

DataType

NV

6000

0x0E

BOOL

RO

tx

TxPdoState

0x11

REAL

RO

tx

Sensor Value

Is set if the device is not in Safe State (value (I 0x6nn0, SI 0x11) = valid)
TxPdoState
0
1

Subindex 0x11

4.6.2 Input Heat Transfer

Subindex 0x01

Invalid
Valid

The corrected, converted, calibrated final analog input value of the sensor.

Index

SI

DataType

6003

0x01

BOOL

NV

AccessPM NameRO

tx

Reading Valid

0x02

BOOL

RO

tx

Overrange Exceeded

0x03

BOOL

RO

tx

Underrange Exceeded

Indicates whether the Value parameter contains a valid value within the specified
accuracy or not.
Reading Valid

Subindex 0x02

0Invalid

1

Valid

Indicates whether the Value parameter contains a value in over range.
Reading Valid

22

0

No Overrange Exceeded1Overrange Exceeded

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Subindex 0x03

Indicates whether the Value parameter contains a value in under range.
Reading Valid

4.6.3 Input Trip Point 1

Subindex 0x01

0

No Underrange Exceeded1

Underrange Exceeded

Index

SI

DataType

AccessPM Name

600E

0x01

BOOL

RO

tx

Status High Trip

0x02

BOOL

RO

tx

Status Low Trip

Status High Trip
01

Subindex 0x02

Subindex 0x01

Low Trip not assert
Low Trip assert

Index

SI

DataType

AccessPM Name

600F

0x01

BOOL

RO

tx

Status High Trip

0x02

BOOL

RO

tx

Status Low Trip

NV

Status High Trip
01

Subindex 0x02

High Trip not assert
High Trip assert

Status Low Trip
01

4.6.4 Input Trip Point 2

NV

High Trip not assert
High Trip assert

Status Low Trip
0
1

Low Trip not assert
Low Trip assert

4.7 PCG with ATM
Configuration Area(0x8000…0x8FFF)

This chapter describes the configuration area of the PCG with ATM.

4.7.1 Configuration Common
ModuleCalculating the High Trip Point and Low Trip Point → 4.4.7.

Subindex 0x01

Index

SI

DataType

NV

Access8000 or8010 or
8020

0x01

REAL32x

RW

PM Name
Cross Over Area Upper
Limit

0x02

REAL32x

RW

Cross Over Area Lower
Limit

Upper limit of the cross over area.
At low pressures, only the signal of the Pirani sensor is used for pressure measurement; at high pressures, only the signal of the diaphragm
capacitive sensor. To determine the output signal in the cross over area,
both signals are used proportionally to the pressure.

Subindex 0x02

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Lower limit of the cross over area.
23

4.7.2 Configuration
Capacitance DiaphragmSubindex 0x01

4.7.3 Configuration Trip
Point 1Index

SI

DataType

NV

Access

8001

0x01

REAL

x

RW

PM NameZero Adjust Mode

The CDG Sensor is adjusted automatically by the Pirani sensor, if this index is set.
The High Trip Point is calculated by:High Trip Point = Value *) × Percentage **)*)Value from Piezo Sensor (I: 0x6010, SI: 0x11)**)

Percentage High Trip Source (I: 0x800E/F, SI: 0x13)

In this case, the High Trip Point value is automatically updated by the device itself.
Any user-written value to the parameter High Trip will be refused with an abort
code.
The Low Trip Point is a fixed value:
The value defined in Low Trip Point Limit is compared with the pressure valuereferenced by the Source Index parameter.
Measurement signal(Pressure p)

High Trip
Hysteresis

High Trip Point

Low Trip
Hysteresis

Low Trip PointTime tinactive24

activeinactive

activeinactive

Index

SI

DataType

NV

AccessPM Name

800E

0x01

BOOL

x

RW

High Trip Enable

0x02

BOOL

x

RW

Low Trip Enable

0x11

REAL

x

RW

High Trip Point Limit

0x12

UDINT

x

RW

High Trip Source Index

0x13

REAL

x

RW

Percentage High Trip
Source

0x14

REAL

x

RW

Low Trip Point Limit

0x15

UDINT

x

RW

Low Trip Source Index

0x16

REAL

x

RW

Percentage Low Trip
Source

0x17

REAL

x

RW

High Trip Hysteresis

0x18

REAL

x

RW

Low Trip Hysteresis

0x1A

UDINT

x

RW

Source Index

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Subindex 0x01

High Trip Point
01

Subindex 0x02

DisableEnableLow Trip Point0
1

DisableEnableSubindex 0x11

High Trip Point Limit: High limit to trigger trip point condition if Input Value (I0x900E, SI 0x01) is above this limit.

Subindex 0x12

Object index of High Trip Point Value source.
Bit 16…31: Index
Bit 08…15: Subindex
Bit 00…07: reserved
For a fix limit set value to 0x800E1100 (High Trip Point Limit).
For ATM Mode set value to 0x800E1300 (Percentage High Trip Source).

Subindex 0x13

Percentage of High Trip Source: Percentage of Piezo Sensor Value (I 0x6010, SI
0x11) in [%].

Subindex 0x14

Low Trip Point Limit: Low limit to trigger trip point condition if Input Value (I 0x900E,
SI 0x01) is below this limit.

Subindex 0x15

Object index of Low Trip Point Value source.
Bit 16…31: Index
Bit 08…15: Subindex
Bit 00…07: reserved
For a fix limit set value to 0x800E1400.
For ATM Mode set value to 0x800E1600.

Subindex 0x16

High Trip Point Limit: High limit to trigger trip point condition if Input Value (I0x900E, SI 0x01) is above this limit.

Subindex 0x17

High Trip Hysteresis: Hysteresis value for High Trip Point.

Subindex 0x18

Low Trip Hysteresis: Hysteresis value for Low Trip Point.

Subindex 0x1A

Object index of active source of (I 0x900E SI 0x01) Input Value.
Source Index
Bit 16…31
Bit 08…15
Bit 00…07

Index
Subindex
Reserved

Is set to Combi Gauge Value 0xF6401100.

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25

4.7.4 Configuration Trip
Point 2

Calculating the High Trip Point and Low Trip Point → 4.4.7.
Index
800F

Subindex 0x01

DataType

NV

AccessPM Name

0x01

BOOL

x

RW

High Trip Enable

0x02

BOOL

x

RW

Low Trip Enable

0x11

REAL

x

RW

High Trip Point Limit

0x12

UDINT

x

RW

High Trip Source Index

0x13

REAL

x

RW

Percentage High Trip
Source

0x14

REAL

x

RW

Low Trip Point Limit

0x15

UDINT

x

RW

Low Trip Source Index

0x16

REAL

x

RW

Percentage Low Trip
Source

0x17

REAL

x

RW

High Trip Hysteresis

0x18

REAL

x

RW

Low Trip Hysteresis

0x1A

UDINT

x

RW

Source Index

High Trip Point
01

Subindex 0x02

SI

DisableEnableLow Trip Point0
1

DisableEnableSubindex 0x11

High Trip Point limit: High limit to trigger trip point condition if Input Value (I 0x900F,
SI 0x01) is above this limit.

Subindex 0x12

Object index of High Trip Point Value source.
Bit 16…31: Index
Bit 08…15: Subindex
Bit 00…07: reserved
For a fix limit set value to 0x800F1100 (High Trip Point Limit).
For ATM Mode set value to 0x800F1300 (Percentage High Trip Source).

Subindex 0x13

Percentage of High Trip Source: Percentage of Piezo Sensor Value (I 0x60010, SI
0x11) in [%].

Subindex 0x14

Low Trip Point Limit: Low limit to trigger trip point condition if Input Value (I 0x900F,
SI 0x01) is below this limit.

Subindex 0x15

Object index of Low Trip Point Value source.
Bit 16…31: Index
Bit 08…15: Subindex
Bit 00…07: reserved
For a fix limit set value to 0x800F1400.
For ATM Mode set value to 0x800F1600.

Subindex 0x16

26High Trip Point Limit: High limit to trigger trip point condition if Input Value (I0x900F, SI 0x01) is above this limit.

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Subindex 0x17

High Trip Hysteresis: Hysteresis value for High Trip Point.

Subindex 0x18

Low Trip Hysteresis: Hysteresis value for Low Trip Point.

Subindex 0x1A

Object index of active source of (I 0x900F SI 0x01) Input Value.
Source Index
Bit 16…31
Bit 08…15
Bit 00…07

Index
Subindex
Reserved

4.8 PCG without ATM,
Configuration Area(0x8000…0x8FFF)

This chapter describes the configuration area for the PCG without ATM.

4.8.1 Configuration Common
ModuleCalculating the High Trip Point and Low Trip Point → 4.4.7.

Subindex 0x01

Index

SI

DataType

NV

AccessPM Name8000 or
8010

0x01

REAL32x

RW

Cross Over Area Upper
Limit

0x02

REAL32x

RW

Cross Over Area Lower
Limit

Upper limit of the cross over area.
At low pressures, only the signal of the Pirani sensor is used for pressure measurement; at high pressures, only the signal of the diaphragm
capacitive sensor. To determine the output signal in the cross over area,
both signals are used proportionally to the pressure.

Subindex 0x02

4.8.2 Configuration
Capacitance DiaphragmSubindex 0x01

4.8.3 Configuration Trip
Point 1

Lower limit of the cross over area.

Index

SI

DataType

NV

Access

8001

0x01

REAL

x

RW

PM NameZero Adjust Mode

If set the CDG Sensor will be adjusted automatically through the Pirani sensor.

The High Trip Point is a fixed value:
The Low Trip Point is a fixed value:
The value defined in Low Trip Point Limit is compared with the pressure valuereferenced by the Source Index parameter.

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27

Measurement signal(Pressure p)

High Trip
Hysteresis

High Trip Point

Low Trip
Hysteresis

Low Trip PointTime tinactive

Subindex 0x01

inactive

activeinactive

Index

SI

DataType

NV

Access

800E

0x01

BOOL

x

RW

High Trip Enable

0x02

BOOL

x

RW

Low Trip Enable

PM Name

0x11

REAL

x

RW

High Trip Point Limit

0x12

UDINT

x

RW

High Trip Source Index

0x14

REAL

x

RW

Low Trip Point Limit

0x15

UDINT

x

RW

Low Trip Source Index

0x17

REAL

x

RW

High Trip Hysteresis

0x18

REAL

x

RW

Low Trip Hysteresis

0x1A

UDINT

x

RW

Source Index

High Trip Point
01

Subindex 0x02

activeDisableEnableLow Trip Point0
1

DisableEnableSubindex 0x11

High Trip Point Limit: High limit to trigger trip point condition if Input Value(I 0x900E, SI 0x01) is above this limit.

Subindex 0x12

Object index of High Trip Point Value source.
Bit 16…31: Index
Bit 08…15: Subindex
Bit 00…07: reserved
For a fix limit set value to 0x800E1100 (High Trip Point Limit).

Subindex 0x14

Low Trip Point Limit: Low limit to trigger trip point condition if Input Value (I 0x900E,
SI 0x01) is below this limit.

Subindex 0x15

Object index of Low Trip Point Value source.
Bit 16…31: Index
Bit 08…15: Subindex
Bit 00…07: reserved
For a fix limit set value to 0x800E1400.

28

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Subindex 0x17

High Trip Hysteresis: Hysteresis value for High Trip Point.

Subindex 0x18

Low Trip Hysteresis: Hysteresis value for Low Trip Point.

Subindex 0x1A

Object index of active source of (I 0x900E SI 0x01) Input Value.
Source Index
Bit 16…31
Bit 08…15
Bit 00…07

Index
Subindex
Reserved

Is set to Combi Gauge Value 0xF6401100

4.8.4 Configuration Trip
Point 2

Calculating the High Trip Point and Low Trip Point → 4.4.7.
Index
800F

Subindex 0x01

DataType

NV

AccessPM Name

0x01

BOOL

x

RW

High Trip Enable

0x02

BOOL

x

RW

Low Trip Enable

0x11

REAL

x

RW

High Trip Point Limit

0x12

UDINT

x

RW

High Trip Source Index

0x14

REAL

x

RW

Low Trip Point Limit

0x15

UDINT

x

RW

Low Trip Source Index

0x16

REAL

x

RW

Percentage Low Trip
Source

0x17

REAL

x

RW

High Trip Hysteresis

0x18

REAL

x

RW

Low Trip Hysteresis

0x1A

UDINT

x

RW

Source Index

High Trip Point
01

Subindex 0x02

SI

DisableEnableLow Trip Point0
1

DisableEnableSubindex 0x11

High Trip Point limit: High limit to trigger trip point condition if Input Value (I 0x900F,
SI 0x01) is above this limit.

Subindex 0x12

Object index of High Trip Point Value source.
Bit 16…31: Index
Bit 08…15: Subindex
Bit 00…07: reserved
For a fix limit set value to 0x800F1100 (High Trip Point Limit).

Subindex 0x14

Low Trip Point Limit: Low limit to trigger trip point condition if Input Value (I 0x900F,
SI 0x01) is below this limit.

Subindex 0x15

Object index of Low Trip Point Value source.
Bit 16…31: Index
Bit 08…15: Subindex
Bit 00…07: reserved
For a fix limit set value to 0x800F1400.

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29

Subindex 0x17

High Trip Hysteresis: Hysteresis value for High Trip Point.

Subindex 0x18

Low Trip Hysteresis: Hysteresis value for Low Trip Point.

Subindex 0x1A

Object index of active source of (I 0x900F SI 0x01) Input Value.
Source Index
Bit 16…31
Bit 08…15
Bit 00…07

Index
Subindex
Reserved

4.9 PSG Configuration Area(0x8000…0x8FFF)

This chapter describes the configuration area for the PSG.

4.9.1 Configuration Trip
Point 1The High Trip Point is a fixed value

The Low Trip Point is a fixed value:
The value defined in Low Trip Point Limit is compared with the pressure valuereferenced by the Source Index parameter.
Measurement signal(Pressure p)

High Trip
Hysteresis

High Trip Point

Low Trip
Hysteresis

Low Trip PointTime tinactive30

activeinactive

activeinactive

Index

SI

DataType

NV

Access

800E

0x01

BOOL

x

RW

PM NameHigh Trip Enable

0x02

BOOL

x

RW

Low Trip Enable

0x11

REAL

x

RW

High Trip Point Limit

0x12

UDINT

x

RW

High Trip Source Index

0x14

REAL

x

RW

Low Trip Point Limit

0x15

UDINT

x

RW

Low Trip Source Index

0x17

REAL

x

RW

High Trip Hysteresis

0x18

REAL

x

RW

Low Trip Hysteresis

0x1A

UDINT

x

RW

Source Index

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Subindex 0x01

High Trip Point
01

Subindex 0x02

DisableEnableLow Trip Point0
1

DisableEnableSubindex 0x11

High Trip Point Limit: High limit to trigger trip point condition if Input Value (I0x900E, SI 0x01) is above this limit.

Subindex 0x12

Object index of High Trip Point Value source.
Bit 16…31: Index
Bit 08…15: Subindex
Bit 00…07: reserved
For a fix limit set value to 0x800E1100 (High Trip Point Limit).

Subindex 0x14

Low Trip Point Limit: Low limit to trigger trip point condition if Input Value (I 0x900E,
SI 0x01) is below this limit.

Subindex 0x15

Object index of Low Trip Point Value source.
Bit 16…31: Index
Bit 08…15: Subindex
Bit 00…07: reserved
For a fix limit set value to 0x800E1400.

Subindex 0x17

High Trip Hysteresis: Hysteresis value for High Trip Point.

Subindex 0x18

Low Trip Hysteresis: Hysteresis value for Low Trip Point.

Subindex 0x1A

Object index of active source of (I 0x900E SI 0x01) Input Value.
Source Index
Bit 16…31
Bit 08…15
Bit 00…07

Index
Subindex
Reserved

Is set to Combi Gauge Value 0xF6401100.

4.9.2 Configuration Trip
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Calculating the High Trip Point and Low Trip Point → 4.4.7.
Index

SI

DataType

NV

Access

800F

0x01

BOOL

x

RW

PM NameHigh Trip Enable

0x02

BOOL

x

RW

Low Trip Enable

0x11

REAL

x

RW

High Trip Point Limit

0x12

UDINT

x

RW

High Trip Source Index

0x14

REAL

x

RW

Low Trip Point Limit

0x15

UDINT

x

RW

Low Trip Source Index

0x17

REAL

x

RW

High Trip Hysteresis

0x18

REAL

x

RW

Low Trip Hysteresis

0x1A

UDINT

x

RW

Source Index

31

Subindex 0x01

High Trip Point
01

Subindex 0x02

DisableEnableLow Trip Point0
1

DisableEnableSubindex 0x11

High Trip Point limit: High limit to trigger trip point condition if Input Value (I 0x900F,
SI 0x01) is above this limit.

Subindex 0x12

Object index of High Trip Point Value source.
Bit 16…31: Index
Bit 08…15: Subindex
Bit 00…07: reserved
For a fix limit set value to 0x800F1100 (High Trip Point Limit).

Subindex 0x14

Low Trip Point Limit: Low limit to trigger trip point condition if Input Value (I 0x900F,
SI 0x01) is below this limit.

Subindex 0x15

Object index of Low Trip Point Value source.
Bit 16…31: Index
Bit 08…15: Subindex
Bit 00…07: reserved
For a fix limit set value to 0x800F1400.

Subindex 0x17

High Trip Hysteresis: Hysteresis value for High Trip Point.

Subindex 0x18

Low Trip Hysteresis: Hysteresis value for Low Trip Point.

Subindex 0x1A

Object index of active source of (I 0x900F SI 0x01) Input Value.
Source Index
Bit 16…31
Bit 08…15
Bit 00…07

32

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Subindex
Reservedtira85e1-a(2014-10)

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Highest / lowest
measurement value

The Information Data object defines the input process data.

Indicatedpressure
p6'

Error

p5'

4

p4'

Overrangep3'3
Display range

4.10 PCG with ATM
Information Area
(0x9000…0x9FFF)

Measurement
range
2

p2'

Underrange

1

p1'

Error
Real pressure
p0 p1

p2 p3

The "measurement range" is the range between minimum and maximum pressure,
where the reading of the gauge is within the specified measurement uncertainty
limits.
The display range is the complete pressure range where the gauge gives anindication (measurement signal). The display range consists of underrange,measurement range and overrange.
According to these definitions, 4 points are defined:1
2
3
4

tira85e1-a

Lowest informational measurement value
Lowest precision measurement value
Highest precision measurement value
Highest informational measurement value

Index

SI

DataType

NV

Access

9000

0x02

REAL

x

RO

PM NameHighest Informational
Measurement Value

0x03

REAL

x

RO

Highest Precision
Measurement Value

0x04

REAL

x

RO

Lowest Precision
Measurement Value

Subindex 0x02

Highest Informational Measurement Value: Highest value that the gauge canmeasure without a specified accuracy.

Subindex 0x03

Highest Precision Measurement Value: Highest valid value at which the gauge is
specified with an accuracy value. Above that value, the parameter Reading Valid is
set to invalid.

Subindex 0x04

Lowest Precision Measurement Value: Lowest valid value at which the gauge is
specified with an accuracy value. Below that value, the parameter Reading Valid is
set to invalid.

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33

4.10.1 Information
Capacitance DiaphragmSubindex 0x01

Index

SI

DataType

9001

0x01

UINT

RO

Sensor Warning

0x02

UINT

RO

Sensor Alarm

0
Electronics Warning
0

Diaphragm Failure
Electronics Failure
0

Index

SI

DataType

NV

AccessPM Name

9010

0x02

REAL

x

RO

Highest Informational
Measurement Value

0x03

REAL

x

RO

Highest Precision
Measurement Value

0x04

REAL

x

RO

Lowest Precision
Measurement Value

Subindex 0x02

Highest Informational Measurement Value: Highest value that the gauge canmeasure without a specified accuracy.

Subindex 0x03

Highest Precision Measurement Value: Highest valid value at which the gauge is
specified with an accuracy value. Above that value, the parameter Reading Valid is
set to invalid.

Subindex 0x04

Lowest Precision Measurement Value: Lowest valid value at which the gauge is
specified with an accuracy value. Below that value, the parameter Reading Valid is
set to invalid.

4.10.3 Information Piezo

Index
9012

Subindex 0x01

Subindex 0x02

DataType

NV

AccessPM Name

0x01

UINT

RO

Sensor Warning

0x02

UINT

RO

Sensor Alarm0

Sensor Alarms
Bit 0…15

4.10.4 Information Common

SI

Sensor Warnings
Bit 0…15

34

PM NameSensor Alarms
Bit 0
Bit 1
Bit 2…15

4.10.2 Information Common

AccessSensor Warnings
Bit 0
Bit 1
Bit 2…15

Subindex 0x02

NV

0

Index

SI

DataType

NV

AccessPM Name

9020

0x02

REAL

x

RO

Highest Informational
Measurement Value

0x03

REAL

x

RO

Highest Precision
Measurement Value

0x04

REAL

x

RO

Lowest Precision
Measurement Value

tira85e1-a(2014-10)

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Subindex 0x02

Highest Informational Measurement Value: Highest value that the gauge canmeasure without a specified accuracy.

Subindex 0x03

Highest Precision Measurement Value: Highest valid value at which the gauge is
specified with an accuracy value. Above that value, the parameter Reading Valid is
set to invalid.

Subindex 0x04

Lowest Precision Measurement Value: Lowest valid value at which the gauge is
specified with an accuracy value. Below that value, the parameter Reading Valid is
set to invalid.

4.10.5 Information Heat
Transfer

Subindex 0x01

Index
9023

tira85e1-aNV

AccessPM Name

0x01

UINT

RO

Sensor Warning

0x02

UINT

RO

Sensor Alarm

0

Bit 1

Electronics Warning

Bit 2…15

0

Sensor Alarms
Bit 0

4.10.6 Information Trip
Point 1/2

DataType

Sensor Warnings
Bit 0

Subindex 0x02

SI

0

Bit 1

Electronics Failure

Bit 2…15

0

Index

SI

DataType

NV

AccessPM Name

900E

0x01

REAL

RO

Input Value Trip Point 1

900F

0x02

REAL

RO

Input Value Trip Point 2

Subindex 0x01

Input Value Trip Point 1: Trip Point Input value as referenced by Source Index (I0x800E, SI 0x0E).

Subindex 0x02

Input Value Trip Point 2: 0 Trip Point Input value as referenced by Source Index (I0x800F, SI 0x0E).

(2014-10)

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35

Highest / lowest
measurement value

The Information Data object defines the input process data.

Indicatedpressure
p6'

Error

p5'

4

p4'

Overrangep3'3
Display range

4.11 PCG without ATM,
Information Area
(0x9000…0x9FFF)

Measurement
range
2

p2'

Underrange

1

p1'

Error
Real pressure
p0 p1

p2 p3

The "measurement range" is the range between minimum and maximum pressure,
where the reading of the gauge is within the specified measurement uncertainty
limits.
The display range is the complete pressure range where the gauge gives anindication (measurement signal). The display range consists of underrange,measurement range and overrange.
According to these definitions, 4 points are defined:
1
2
3
4

Index

SI

DataType

NV

AccessPM Name

9000

0x02

REAL

x

RO

Highest Informational
Measurement Value

0x03

REAL

x

RO

Highest Precision
Measurement Value

0x04

REAL

x

RO

Lowest Precision
Measurement Value

Subindex 0x02

Highest Informational Measurement Value: Highest value that the gauge canmeasure without a specified accuracy.

Subindex 0x03

Highest Precision Measurement Value: Highest valid value at which the gauge is
specified with an accuracy value. Above that value, the parameter Reading Valid is
set to invalid.

Subindex 0x04

Lowest Precision Measurement Value: Lowest valid value at which the gauge is
specified with an accuracy value. Below that value, the parameter Reading Valid is
set to invalid.

4.11.1 Information
Capacitance Diaphragm36

Lowest informational measurement value
Lowest precision measurement value
Highest precision measurement value
Highest informational measurement value

Index
9001

SI

DataType

NV

AccessPM Name

0x01

UINT

RO

Sensor Warning

0x02

UINT

RO

Sensor Alarm

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Subindex 0x01

Sensor Warnings
Bit 0
Bit 1
Bit 2…15

Subindex 0x02

Sensor Alarms
Bit 0
Bit 1
Bit 2…15

4.11.2 Information Common

Diaphragm Failure
Electronics Failure
0

Index

SI

DataType

NV

Access

9010

0x02

REAL

x

RO

PM NameHighest Informational
Measurement Value

0x03

REAL

x

RO

Highest Precision
Measurement Value

0x04

REAL

x

RO

Lowest Precision
Measurement Value

Subindex 0x02

Highest Informational Measurement Value: Highest value that the gauge canmeasure without a specified accuracy.

Subindex 0x03

Highest Precision Measurement Value: Highest valid value at which the gauge is
specified with an accuracy value. Above that value, the parameter Reading Valid is
set to invalid.

Subindex 0x04

Lowest Precision Measurement Value: Lowest valid value at which the gauge is
specified with an accuracy value. Below that value, the parameter Reading Valid is
set to invalid.

4.11.3 Information Heat
Transfer

Subindex 0x01

Subindex 0x02

4.11.4 Information Trip
Point 1/2

Subindex 0x01

tira85e1-a0Electronics Warning0(2014-10)

PxG55x.cp

Index

SI

DataType

9013

0x01

UINT

NV

AccessRO

PM NameSensor Warning

0x02

UINT

RO

Sensor Alarm

Sensor Warnings
Bit 0

0

Bit 1

Electronics Warning

Bit 2…15

0

Sensor Alarms
Bit 0

0

Bit 1

Electronics Failure

Bit 2…15

0

Index

SI

DataType

NV

AccessPM Name

900E

0x01

REAL

RO

Input Value Trip Point 1

900F

0x02

REAL

RO

Input Value Trip Point 2

Input Value Trip Point 1: Trip Point Input value as referenced by Source Index (I0x800E, SI 0x0E).

37

4.12 PSG Information Area
(0x9000…0x9FFF)
Highest / lowest
measurement value

Input Value Trip Point 2: 0 Trip Point Input value as referenced by Source Index (I0x800F, SI 0x0E).

The Information Data object defines the input process data.

Indicatedpressure
p6'

Error

p5'

4

p4'

Overrangep3'3
Display range

Subindex 0x02

Measurement
range
2

p2'

Underrange

1

p1'

Error
Real pressure
p0 p1

p2 p3

The "measurement range" is the range between minimum and maximum pressure,
where the reading of the gauge is within the specified measurement uncertainty
limits.
The display range is the complete pressure range where the gauge gives anindication (measurement signal). The display range consists of underrange,measurement range and overrange.
According to these definitions, 4 points are defined:
1
2
3
4

4.12.1 Information Common

38

Lowest informational measurement value
Lowest precision measurement value
Highest precision measurement value
Highest informational measurement value

Index

SI

DataType

NV

AccessPM Name

9000

0x02

REAL

x

RO

Highest Informational
Measurement Value

0x03

REAL

x

RO

Highest Precision
Measurement Value

0x04

REAL

x

RO

Lowest Precision
Measurement Value

Subindex 0x02

Highest Informational Measurement Value: Highest value that the gauge canmeasure without a specified accuracy.

Subindex 0x03

Highest Precision Measurement Value: Highest valid value at which the gauge is
specified with an accuracy value. Above that value, the parameter Reading Valid is
set to invalid.

Subindex 0x04

Lowest Precision Measurement Value: Lowest valid value at which the gauge is
specified with an accuracy value. Below that value, the parameter Reading Valid is
set to invalid.

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4.12.2 Information Heat
Transfer

Subindex 0x01

Subindex 0x02

4.12.3 Information Trip
Point 1/2

Index

SI

DataType

NV

AccessPM Name

9003

0x01

UINT

RO

Sensor Warning

0x02

UINT

RO

Sensor Alarm

Sensor Warnings
Bit 0

0

Bit 1

Electronics Warning

Bit 2…15

0

Sensor Alarms
Bit 0

0

Bit 1

Electronics Failure

Bit 2…15

0

Index

SI

DataType

NV

AccessPM Name

900E

0x01

REAL

RO

Input Value Trip Point 1

900F

0x02

REAL

RO

Input Value Trip Point 2

Subindex 0x01

Input Value Trip Point 1: Trip Point Input value as referenced by Source Index (I0x800E, SI 0x0E).

Subindex 0x02

Input Value Trip Point 2: 0 Trip Point Input value as referenced by Source Index (I0x800F, SI 0x0E).

4.13 Device Area
(0xF000...0xAFFF)
4.13.1 Semiconductor Device
ProfileF000

SI

DataType

NV

AccessPM Name

0x01

UINT

RO

Index Distance

0x02

UINT

RO

Maximum Number ofModulesSubindex 0x01

Index Distance: Index offset between PDO entries of two consecutive modules (forETG.5003 = 0x10).

Subindex 0x02

Maximum Number of Modules: Up to 255 modules are possible. A device can
support less than this. This entry described the supported number of modules.

4.13.2 PCG with ATM Module
Profile List

tira85e1-a

Index

Index

SI

DataType

F010

0x01

UDINT

NV

AccessRO

PM NameProfile Number Module 1

0x02

UDINT

RO

Profile Number Module 2

0x03

UDINT

RO

Profile Number Module 3

Subindex 0x01

Each sub-index lists the profile-number of the corresponding module.

Subindex 0x02

Each sub-index lists the profile-number of the corresponding module.

Subindex 0x03

Each sub-index lists the profile-number of the corresponding module.

(2014-10)

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39

4.13.3 PCG without ATM,
Module Profile List

SI

DataType

AccessPM Name

F010

0x01

UDINT

RO

Profile Number Module 1

0x02

UDINT

RO

Profile Number Module 2

Each sub-index lists the profile-number of the corresponding module.

Subindex 0x02

Each sub-index lists the profile-number of the corresponding module.

Subindex 0x01

Index

SI

DataType

F010

0x01

UDINT

NV

AccessPM NameRO

Profile Number Module 1

Each sub-index lists the profile-number of the corresponding module.

Exceptions

4.14.1 Active Exception Status

Index

SI

F380

Active Exception Status

4.14.2 PCG with ATM Active
Device Warning Details

Subindex 0x01

Subindex 0x02 (CDG)

DataType

NV

USINT

AccessPM NameRO

tx

ActiveException Status

Active Exception Status
Bit 0

Device Warning

Bit 1

Manufacturer Warning

Bit 2

Device Error

Bit 3

Manufacturer Error

Bit 4…70

The "active device warning details" parameter describes the warning state of thecomplete device.
Index

SI

DataType

AccessPM Name

F381

0x01

UDINT

RO

tx

Active Device Warning
Details Device

0x02

UDINT

RO

tx

Active Device Warning
Details Module 1

0x03

UDINT

RO

tx

Active Device Warning
Details Module 2

0x04

UDINT

RO

tx

Active Device Warning
Details Module 3

0x01

UDINT

RO

tx

Active Manufacturer
Warning Details

F382

40

NV

Subindex 0x01

4.13.4 PSG Module Profile List

4.14

Index

NV

Active Device Warning Details(Index F381)
Bit 0…20

Bit 3

EEPROM exception

Bit 4…31

0

Active Device Warning Details(Index F381)
Bit 0

0

Bit 1

Electronics exception

Bit 2…31

0

tira85e1-a(2014-10)

PxG55x.cp

Subindex 0x03 (Piezo)

Subindex 0x04 (Pirani)

Subindex 0x01

4.14.3 PCG without ATM,
Active Device Warning
Details

Active Device Warning Details(Index F381)
Bit 0

0

Bit 1

Electronics exception

Bit 2…31

0

Active Device Warning Details(Index F381)
Bit 0

0

Bit 1

Electronics exception

Bit 2…31

0

Active Manufacturer Warning Details (Index F382)
Bit 0Internal Communication Exception (between
EtherCAT-Protocol and Device-Application)

Bit 1…31

0

The "active device warning details" parameter describes the warning state of thecomplete device.
Index

SI

DataType

AccessPM Name

F381

0x01

UDINT

RO

tx

Active Device Warning
Details Device

0x02

UDINT

RO

tx

Active Device Warning
Details Module 1

0x03

UDINT

RO

tx

Active Device Warning
Details Module 2

0x01

UDINT

RO

tx

Active Manufacturer
Warning Details

F382

Subindex 0x01

Subindex 0x02 (CDG)

Subindex 0x03 (Pirani)

Subindex 0x01

tira85e1-a(2014-10)

PxG55x.cp

NV

Active Device Warning Details(Index F381)
Bit 0…20

Bit 3

EEPROM exception

Bit 4…31

0

Active Device Warning Details(Index F381)
Bit 0

0

Bit 1

Electronics exception

Bit 2…31

0

Active Device Warning Details(Index F381)
Bit 0

0

Bit 1

Electronics exception

Bit 2…31

0

Active Manufacturer Warning Details (Index F382)
Bit 0Internal Communication Exception (between
EtherCAT-Protocol and Device-Application)

Bit 1…31

041

4.14.4 PSG Active Device
Warning Details

The "active device warning details" parameter describes the warning state of thecomplete device.
Index

SI

DataType

AccessPM Name

F381

0x01

UDINT

RO

tx

Active Device Warning
Details Device

0x02

UDINT

RO

tx

Active Device Warning
Details Module 1

0x01

UDINT

RO

tx

Active Manufacturer
Warning Details

F382

Subindex 0x01

Active Device Warning Details(Index F381)
Bit 0…2

Subindex 0x02 (Pirani)

Subindex 0x01

4.14.5 PCG with ATM Active
Device Error Details

Subindex 0x02 (CDG)

Subindex 0x03 (ATM)EEPROM exception

Bit 4…31

0

Active Device Warning Details(Index F381)
Bit 0

0

Bit 1

Electronics exception

Bit 2…31

0

Active Manufacturer Warning Details (Index F382)
Bit 0Internal Communication Exception (between
EtherCAT-Protocol and Device-Application)

Bit 1…31

0

The "active device error details" parameter describes the error state of thecomplete device.
Index

SI

DataType

F383

0x01

NV

AccessPM Name

UDINT

RO

tx

Active Device Error Details
Device

0x02

UDINT

RO

tx

Active Device Error Details
Module 1

0x03

UDINT

RO

tx

Active Device Error Details
Module 2

0x01

UDINT

RO

tx

Active Manufacturer Error
Details

Active Device Error Details (Index F383)
Bit 0…20

Bit 3

EEPROM exception

Bit 4…31

0

Active Device Error Details (Index F383)
Bit 0

Diaphragm Failure

Bit 1

Electronics failure

Bit 2…31

0

Active Device Error Details (Index F383)
Bit 0…31

42

0

Bit 3

F384

Subindex 0x01

NV0

tira85e1-a(2014-10)

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Subindex 0x04 (Pirani)

Subindex 0x01

4.14.6 PCG without ATM,
Active Device Error
Details

Active Device Error Details (Index F383)
Bit 0

Sensor Failure

Bit 1

Electronics exception

Bit 2…31

0

Active Manufacturer Error Details (Index F384)
Bit 0Internal Communication Exception (between
EtherCAT-Protocol and Device-Application)

Bit 1…31

0

The "active device error details" parameter describes the error state of thecomplete device.
Index

SI

DataType

AccessPM Name

F383

0x01

UDINT

RO

tx

Active Device Error Details
Device

0x02

UDINT

RO

tx

Active Device Error Details
Module 1

0x03

UDINT

RO

tx

Active Device Error Details
Module 2

0x01

UDINT

RO

tx

Active Manufacturer Error
Details

F384

Subindex 0x01

Active Device Error Details (Index F383)
Bit 0…2

Subindex 0x02 (CDG)

Subindex 0x03 (Pirani)

Subindex 0x01

tira85e1-a(2014-10)

PxG55x.cp

NV

0

Bit 3

EEPROM exception

Bit 4…31

0

Active Device Error Details (Index F383)
Bit 0

Diaphragm Failure

Bit 1

Electronics failure

Bit 2…31

0

Active Device Error Details (Index F383)
Bit 0

Sensor Failure

Bit 1

Electronics exception

Bit 2…31

0

Active Manufacturer Error Details (Index F384)
Bit 0Internal Communication Exception (between
EtherCAT-Protocol and Device-Application)

Bit 1…31

043

4.14.7 PSG Active Device
Error Details

The "active device error details" parameter describes the error state of thecomplete device.
Index

SI

DataType

AccessPM Name

F383

0x01

UDINT

RO

tx

Active Device Error Details
Device

0x02

UDINT

RO

tx

Active Device Error Details
Module 1

0x01

UDINT

RO

tx

Active Manufacturer Error
Details

F384

Subindex 0x01

Active Device Error Details (Index F383)
Bit 0…2

Subindex 0x02 (Pirani)

Subindex 0x01

4.14.8 PCG with ATM Latched
Device Warning Details

0

Bit 3

EEPROM exception

Bit 4…31

0

Active Device Error Details (Index F383)
Bit 0

Sensor Failure

Bit 1

Electronics exception

Bit 2…31

0

Active Manufacturer Error Details (Index F384)
Bit 0Internal Communication Exception (between
EtherCAT-Protocol and Device-Application)

Bit 1…31

0

Index

SI

AccessPM Name

USINT

RO

tx

Latched Exceptions Status

0x01

UDINT

RO

tx

Latched Device Warning
Details Device

0x02

UDINT

RO

tx

Latched Device Warning
Details Module 1

0x03

UDINT

RO

tx

Latched Device Warning
Details Module 2

0x04

UDINT

RO

tx

Latched Device Warning
Detail Module 3

0x01

UDINT

RO

tx

Latched Manufacturer
Warning Details

F390
F391

F392

44

NV

DataType

NV

Latched Exceptions Status

Latched version of 0xF380.

Subindex 0x01

Latched Device Warning Details Device: Latched version of 0xF381:01.

Subindex 0x02

Latched Device Warning Details Module 1: Latched version of 0xF381:02.

Subindex 0x03

Latched Device Warning Details Module 2: Latched version of 0xF381:03.

Subindex 0x04

Latched Device Warning Details Module 3: Latched version of 0xF381:04.

Subindex 0x01 (F392)

Latched Manufacturer Warning Details: Latched version of 0xF382:01.

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4.14.9 PCG without ATM,
Latched Device
Warning Details

Index

AccessPM Name

USINT

RO

tx

Latched Exceptions Status

0x01

UDINT

RO

tx

Latched Device Warning
Details Device

0x02

UDINT

RO

tx

Latched Device Warning
Details Module 1

0x03

UDINT

RO

tx

Latched Device Warning
Details Module 2

0x01

UDINT

RO

tx

Latched Manufacturer
Warning Details

F390
F391

F392

DataType

NV

Latched Exceptions Status

Latched version of 0xF380.

Subindex 0x01

Latched Device Warning Details Device: Latched version of 0xF381:01.

Subindex 0x02

Latched Device Warning Details Module 1: Latched version of 0xF381:02.

Subindex 0x03

Latched Device Warning Details Module 2: Latched version of 0xF381:03.

Subindex 0x01 (F392)

Latched Manufacturer Warning Details: Latched version of 0xF382:01.

4.14.10 PSG Latched Device
Warning Details

Index

F392

DataType

AccessPM Name

USINT

NV

RO

tx

Latched Exceptions Status

0x01

UDINT

RO

tx

Latched Device Warning
Details Device

0x02

UDINT

RO

tx

Latched Device Warning
Detail Module 1

0x01

UDINT

RO

tx

Latched Manufacturer
Warning Details

Latched Exceptions Status

Latched version of 0xF380.

Subindex 0x01

Latched Device Warning Details Device: Latched version of 0xF381:01.

Subindex 0x02

Latched Device Warning Details Module 1: Latched version of 0xF381:02.

Subindex 0x01 (F392)

Latched Manufacturer Warning Details: Latched version of 0xF382:01.

4.14.11 PCG with ATM
Latched Device Error
Details

Index

SI

DataType

F393

0x01

F394

Subindex 0x01
(2014-10)

SI

F390
F391

tira85e1-a

SI

PxG55x.cp

NV

AccessPM Name

UDINT

RO

tx

Latched Device Error
Details Device

0x02

UDINT

RO

tx

Latched Device Error
Details Module 1

0x03

UDINT

RO

tx

Latched Device Error
Details Module 2

0x04

UDINT

RO

tx

Latched Device Error
Details Module 3

0x01

UDINT

RO

tx

Latched Manufacturer
Error Details

Latched Device Error Details Device: Latched version of 0xF383:01.
45

Subindex 0x02

Latched Device Error Details Module 1: Latched version of 0xF383:02.

Subindex 0x03

Latched Device Error Details Module 2: Latched version of 0xF383:03.

Subindex 0x04

Latched Device Error Details Module 3: Latched version of 0xF383:04.

Subindex 0x01 (F394)

Latched Manufacturer Error Details: Latched version of 0xF384:01.

4.14.12 PCG without ATM,
Latched Device Error
Details

Index

SI

DataType

F393

0x01

F394

AccessPM Name

UDINT

RO

tx

Latched Device Error
Details Device

0x02

UDINT

RO

tx

Latched Device Error
Details Module 1

0x03

UDINT

RO

tx

Latched Device Error
Details Module 2

0x01

UDINT

RO

tx

Latched Manufacturer
Error Details

Subindex 0x01

Latched Device Error Details Device: Latched version of 0xF383:01.

Subindex 0x02

Latched Device Error Details Module 1: Latched version of 0xF383:02.

Subindex 0x03

Latched Device Error Details Module 2: Latched version of 0xF383:03.

Subindex 0x01 (F394)

Latched Manufacturer Error Details: Latched version of 0xF384:01.

4.14.13 PSG Latched Device
Error Details

Index

SI

DataType

F393

0x01

F394

46

NV

NV

AccessPM Name

UDINT

RO

tx

Latched Device Error
Details Device

0x02

UDINT

RO

tx

Latched Device Error
Details Module 1

0x01

UDINT

RO

tx

Latched Manufacturer
Error Details

Subindex 0x01

Latched Device Error Details Device: Latched version of 0xF383:01.

Subindex 0x02

Latched Device Error Details Module 1: Latched version of 0xF383:02.

Subindex 0x01 (F394)

Latched Manufacturer Error Details: Latched version of 0xF384:01.

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4.14.14 PCG with ATM Device
Warning Mask

Index

SI

DataType

NV

Access

F3A1

0x01

UDINT

x

RW

Device Warning Mask
Device

0x02

UDINT

x

RW

Device Warning Mask
Module 1

0x03

UDINT

x

RW

Device Warning Mask
Module 2

0x04

UDINT

X

RW

Device Warning Mask
Module 3

0x01

UDINT

x

RW

Manufacturer Warning
Mask

F3A2

Subindex 0x01

Device Warning Mask Device: Mask bits for 0xF381:01 and 0xF391:01.

Subindex 0x02

Device Warning Mask Module 1: Mask bits for 0xF381:02 and 0xF391:02.

Subindex 0x03

Device Warning Mask Module 2: Mask bits for 0xF381:03 and 0xF391:03.

Subindex 0x04

Device Warning Mask Module 3: Mask bits for 0xF381:03 and 0xF391:04.

Subindex 0x01 (F3A2)

Manufacturer Warning Mask: Mask bits for 0xF382:01 and 0xF392:01.

4.14.15 PCG without ATM,
Device Warning Mask

Index

SI

DataType

NV

Access

F3A1

0x01

UDINT

x

RW

Device Warning Mask
Device

0x02

UDINT

x

RW

Device Warning Mask
Module 1

0x03

UDINT

x

RW

Device Warning Mask
Module 2

0x01

UDINT

x

RW

Manufacturer Warning
Mask

F3A2

Device Warning Mask Device: Mask bits for 0xF381:01 and 0xF391:01.

Subindex 0x02

Device Warning Mask Module 1: Mask bits for 0xF381:02 and 0xF391:02.

Subindex 0x03

Device Warning Mask Module 2: Mask bits for 0xF381:03 and 0xF391:03.

Subindex 0x01 (F3A2)

Manufacturer Warning Mask: Mask bits for 0xF382:01 and 0xF392:01.

Index

SI

DataType

NV

Access

F3A1

0x01

UDINT

x

RW

Device Warning Mask
Device

0x02

UDINT

x

RW

Device Warning Mask
Module 1

0x01

UDINT

x

RW

Manufacturer Warning
Mask

F3A2

Subindex 0x01

(2014-10)

PM NameSubindex 0x01

4.14.16 PSG Device WarningMask

tira85e1-a

PM NamePxG55x.cp

PM Name

Device Warning Mask Device: Mask bits for 0xF381:01 and 0xF391:01.

47

Subindex 0x02

Device Warning Mask Module 1: Mask bits for 0xF381:02 and 0xF391:02.

Subindex 0x01 (F3A2)

Manufacturer Warning Mask: Mask bits for 0xF382:01 and 0xF392:01.

4.14.17 PCG with ATM Device
Error Mask

Index

SI

DataType

NV

Access

F3A3

0x01

UDINT

x

RW

Device Error Mask Device

0x02

UDINT

x

RW

Device Error Mask
Module 1

0x03

UDINT

x

RW

Device Error Mask
Module 2

0x04

UDINT

x

RW

Device Error Mask
Module 3

0x01

UDINT

x

RW

Manufacturer Error Mask

F3A4

Subindex 0x01

Device Error Mask Device: Mask bits for 0xF383:01 and 0xF393:01.

Subindex 0x02

Device Error Mask Module 1: Mask bits for 0xF383:02 and 0xF393:02.

Subindex 0x03

Device Error Mask Module 2: Mask bits for 0xF383:03 and 0xF393:03.

Subindex 0x04

Device Error Mask Module 3: Mask bits for 0xF383:03 and 0xF393:04.

Subindex 0x01 (F3A4)

Manufacturer Error Mask: Mask bits for 0xF384:01 and 0xF394:01.

4.14.18 PCG without ATM
Device Error Mask

Index

SI

DataType

NV

Access

F3A3

0x01

UDINT

x

RW

Device Error Mask Device

0x02

UDINT

x

RW

Device Error Mask
Module 1

0x03

UDINT

x

RW

Device Error Mask
Module 2

0x01

UDINT

x

RW

Manufacturer Error Mask

F3A4

PM NameSubindex 0x01

Device Error Mask Device: Mask bits for 0xF383:01 and 0xF393:01.

Subindex 0x02

Device Error Mask Module 1: Mask bits for 0xF383:02 and 0xF393:02.

Subindex 0x03

Device Error Mask Module 2: Mask bits for 0xF383:03 and 0xF393:03.

Subindex 0x01 (F3A4)

Manufacturer Error Mask: Mask bits for 0xF384:01 and 0xF394:01.

4.14.19 PSG Device Error
Mask

Index

SI

DataType

NV

Access

F3A3

0x01

UDINT

x

RW

Device Error Mask Device

0x02

UDINT

x

RW

Device Error Mask
Module 1

0x01

UDINT

x

RW

Manufacturer Error Mask

F3A4

Subindex 0x01

48

PM NamePM Name

Device Error Mask Device: Mask bits for 0xF383:01 and 0xF393:01.

tira85e1-a(2014-10)

PxG55x.cp

Subindex 0x02

Device Error Mask Module 1: Mask bits for 0xF383:02 and 0xF393:02.

Subindex 0x01 (F3A4)

Manufacturer Error Mask: Mask bits for 0xF384:01 and 0xF394:01.

4.15 Manufacturer-device
specific Profile Objects(0xF500...0xF5FF)

The manufacturer-specific profile objects contain the manufacturer's model number
and device configuration data, status and diagnostic data. The objects aredescribed in the following tables.

4.15.1

Index

Manufacturer Device
Information

SI

DataType

NV

AccessPM NameF500

V_STRINGRO

Manufacturer's Model
NumberF501

V_STRING

RO

Device Configuration

Device Configuration Meaning:tira85e1-a(2014-10)

PxG55x.cp

ShortcutMeaning

ExampleDS9

D-Sub 9-pin

DS15HD

FCC

FCC

HM

Hirschmann

DS15HD

D-Sub 15-pin. HD

SP

Setpoint

SP

PS

Potential separationPS

WO or NI

Filament Tungsten / Nickel

WO

ATM

ATM

ATM

DIS

Display

DIS

DN

DeviceNet

DN

PB

Profibus

RS1

RS485 I

RS2

RS485 II

RS3

RS485 III

RS4

RS485 IV

CDG

CDG

CDG

AO0

Characteristic

AO0

AO1

Characteristic

AO3

Characteristic

TTR21X

TTR21x Compatibility

PIR

PiraniPIR

EC

EtherCATEC

TTR21X

49

4.16 Gauge General
4.16.14.16.2

Combination Gauge

Index

SI

DataType

F640

0x01

NV

AccessPM Name

BOOL

RO

tx

Combination Gauge
Reading Valid

0x02

BOOL

RO

tx

Combination Gauge
Overrange Exceeded

0x03

BOOL

RO

tx

Combination Gauge
Underrange Exceeded

0x11

REAL

RO

tx

Combination Gauge Active
Value

0x12

UINT

RO

tx

Combination Gauge Active
Sensor Number

Subindex 0x01

Identifies whether the complete vacuum pressure gauge (with several measuring
principles) is out of its absolute overrange or absolute underrange, or in any otherfailure condition.

Subindex 0x02

If the bit “Overrange” is set, all instances of the gauge are in an overrange
condition.

Subindex 0x03

If the bit “Underrange” is set, all instances of the gauge are in an underrange
condition

Subindex 0x11

The value copied from the measurement value of the active measuring instanceused for the Input PDO.

Subindex 0x12

Identifies the object instance that is providing the measurement value, the latter ofwhich is copied into the Active Value parameter for all Input PDO’s.

Trip Point Output All

Index

SI

DataType

F641

0x01

UDINT

Subindex 0x01

NV

AccessPM NameRO

tx

Trip Point Output All
Instance

Status of Trip Point instances.
Trip Point Output All Instance
Bit 0
Bit 1
Bit 2
Bit 3
…
Bit 30
Bit 3150

Status High Trip (I 0x600E, SI 0x01)
Status Low Trip (I 0x600E S,I 0x02)
Status High Trip (I 0x600F, SI 0x01)
Status Low Trip (I 0x600F, SI 0x02)…
Status High Trip (I 0x608F, SI 0x01)
Status Low Trip (I 0x608F, SI 0x02)

tira85e1-a(2014-10)

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4.16.3

Input Latch Local
Timestamp

Index

SI

DataType

F6F0

0x01

NV

AccessPM Name

UDINT

RO

tx

Input Latch Local
Timestamp. Mandatory if
device has inputs(TxPDOs)

0x02

UDINT

RO

tx

Input Latch Local
Timestamp. Mandatory if
device has inputs(TxPDOs)

0x03

UDINT

RO

tx

Input Latch Local
Timestamp. Mandatory if
device has inputs(TxPDOs)

Subindex 0x01

Local controller time corresponding to the input latch time in microseconds. It starts
at zero on device power-up. Mandatory if device has inputs. If device has no inputs
defined, this corresponds the time immediately prior to writing to input SM.

Subindex 0x02

Local controller time corresponding to the input latch time in microseconds. It starts
at zero on device power-up. Mandatory if device has inputs. If device has no inputs
defined, this corresponds the time immediately prior to writing to input SM.

Subindex 0x03

Local controller time corresponding to the input latch time in microseconds. It starts
at zero on device power-up. Mandatory if device has inputs. If device has no inputs
defined, this corresponds the time immediately prior to writing to input SM.

4.17 Configure Device

Subindex 0x01

Index

SI

DataType

NV

Access

F840

0x01

UDINT

x

RW

PM Name
Data Units

Unit of the Value of the Analog Input Sensor Instance and all related parameters.
Trip Point Output All Instance
0x00220000
0xFD4E0000
0x00A10000
0x00E00000

tira85e1-a(2014-10)

PxG55x.cp

Pascalmbar
TorrCounts (INFICON)51

4.18 Information
4.18.1

PCG with ATM
Information Device

Index
F940

SI

DataType

F9F2

F9F5

52

PM

Name

0x01

UDINT

RO

Measurement Principle

BYTE

RO

Number of Sensors

0x04

V_STRINGROSW Version VPG PCB

V_STRINGRO

Manufacturer Serial
Number

0x01

UDINT

RO

CDP Functional
Generation Number
Module 1

0x02

UDINT

RO

CDP Functional
Generation Number
Module 2

0x03

UDINT

RO

CDP Functional
Generation Number
Module 3

0x01

UDINT

RO

SDP Functional
Generation Number
Module 1

0x02

UDINT

RO

SDP Functional
Generation Number
Module 2

0x03

UDINT

RO

SDP Functional
Generation Number
Module 3

V_STRINGRO

Vendor Name

0x01

V_STRING

RO

Semiconductor SDP
Device Name Module 1

0x02

V_STRING

RO

Semiconductor SDP
Device Name Module 2

0x03

V_STRING

RO

Semiconductor SDP
Device Name Module 3

0x01

USINT

RW

rx/tx Output Identifier Module 1

0x02

USINT

RW

rx/tx Output Identifier Module 2

0x03

USINT

RW

rx/tx Output Identifier Module 3

F9F3
F9F4

Access

0x02
F9F0
F9F1

NV

F9F6

UDINT

F9F7

UDINT

F9F8

UDINT

x

x

RO

Time since power onROTotal time poweredRO

Firmware Update
Functional Generation
Numbertira85e1-a(2014-10)

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4.18.2

PCG without ATM,
Information Device

Index

SI

DataType

F940

0x01

UDINT

0x02

BYTE

0x04

V_STRING

F9F2

F9F5

4.18.3PSG Information
Device

V_STRINGRO

Manufacturer Serial
Number

0x01

UDINT

RO

CDP Functional
Generation Number
Module 1

0x02

UDINT

RO

CDP Functional
Generation Number
Module 2

0x01

UDINT

RO

SDP Functional
Generation Number
Module 1

0x02

UDINT

RO

SDP Functional
Generation Number
Module 2

V_STRINGRO

Vendor Name

V_STRING

RO

Semiconductor SDP
Device Name Module 1

0x02

V_STRING

RO

Semiconductor SDP
Device Name Module 2

0x01

USINT

RW

rx/tx Output Identifier

0x01

USINT

RW

rx/tx Output Identifier

UDINT
UDINT

F9F8

UDINT

Time since power on
Total time poweredRO

Firmware Update
Functional Generation
Number

0x01

UDINT

RO

Measurement Principle

0x02

BYTE

RO

Number of Sensors

V_STRING

NV

RO
RO

DataTypex

Access

PM

Name

RO

SW Version VPG PCB

V_STRINGRO

Manufacturer Serial
Number

F9F1

0x01

UDINT

RO

CDP Functional
Generation Number
Module 1

F9F2

0x01

UDINT

RO

SDP Functional
Generation Number
Module 1

V_STRINGRO

Vendor Name

V_STRING

RO

Semiconductor SDP
Device Name Module 1

F9F3

PxG55x.cp

x

SI

0x04

(2014-10)

x

0x01

F9F0

tira85e1-a

Measurement Principle
Number of Sensors

F9F7

F940

RO

Name

SW Version VPG PCB

F9F6

Index

PM

RO

F9F3
F9F4

Access

RO

F9F0
F9F1

NV

F9F4

0x01

F9F5

0x01

USINT

RW

F9F6

UDINT

RO

Time since power on

F9F7

UDINT

RO

Total time powered

F9F8

UDINT

RO

Firmware Update
Functional Generation
Numberx

rx/tx Output Identifier

53

Subindex 0x01 (F940)

Measurement principle assigned to the object instance.
The most significant nibble of the parameter represents the sensor type of the firstmodule, the second most significant nibble of the parameter represents the sensor
type of the second Module, and so forth.
Measurement Principle (Index F940)
1
2
3
4
5

Capacitance Manometer
Piezo
PiraniCold Cathode
Hot CathodeSubindex 0x02 (F940)

Number of Sensors (Index F940): The number of sensors implemented on thedevice.

Subindex 0x04 (F940)

If the device consists out of several software portions this parameter should be
used.
Using standard a.b.c.d format to describe a version:
SW Version VPG PCB (Index F940)abcdMayor revision
Minor revision
Development revision
Vendor specifici.e. 1.0.1.2

4.19 Adjust and Reset
4.19.1

Command Zero Adjust

Execution of this command will start a Zero Adjust operation.
Index
FB40

Subindex 0x01

Subindex 0x02

DataType

NV

AccessPM Name0x01

V_STRING(6)RW

Command

0x02

BYTE

RO

Status0x03

V_STRING(3)RO

Response

Command
Byte 0

0: Zero adjust with no offset

Byte 1

1: Index of the Sub Sensor (always 1)

Byte 2…5

0: Offset value (Data format: REAL, always 0)

Status (supported values)
0
1
2
3
255

54

SI

Last command completed, no errors, no reply available
Last command completed, no errors, reply available
Last command completed, errors present, no reply
available
Last command completed, errors present, reply available
Command is executing

tira85e1-a(2014-10)

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Subindex 0x03

4.19.2

Full Scale Adjust

Response
Byte 0See Subindex 0x02

Byte 1

UnusedByte 2

0: Zeroing successful
1: Zeroing failed; out-of-range
2: Zeroing failed; cumulative out-of-range
3: Zeroing failed: measurement invalid
254: No previous Zero Adjust command issued

Execution of this command will start a Full Scale Adjust operation.
Index
FB41

Subindex 0x01

Subindex 0x02

Device ResetCommandNV

AccessPM Name0x01

V_STRING(6)RW

Command

0x02

BYTE

RO

Status0x03

V_STRING(3)RO

Response

Byte 00: Full Scale Adjust

Byte 1

2: Index of the Sub Sensor Instance (always 2)

Byte 2…5

Full Scale value (Data format: REAL, always 0)

Status (supported values)

3255

4.19.3

DataType

Command0
1
2

Subindex 0x03

SI

Last command completed, no errors, no reply available
Last command completed, no errors, reply available
Last command completed, errors present, no reply
available
Last command completed, errors present, reply available
Command is executing

Response
Byte 0See Subindex 0x02

Byte 1

UnusedByte 20: Full Scale Adjust successful
1: Full Scale Adjust failed: out-of-range
254: No previous Full Scale Adjust command issued

Execution of this command causes the device to emulate a complete power cycle.
This includes an ESC reset. An SDP may limit some behavior of the power cycle
emulation, but shall not exclude the EtherCAT interface.
As consequence of an ESC reset all following devices are disconnectedfrom the network.
There are two versions of this command:tira85e1-a(2014-10)

PxG55x.cp•

Standard reset (as described above)•

Factory reset (as described above, but additionally, all parameters are restored
to as-shipped defaults).

Index

SI

DataType

FBF0

0x01

V_STRING(6)NV

AccessRW

PM NameCommand

0x02

BYTE

RO

Status0x03

V_STRING(1)RO

Response55

Subindex 0x01

A device reset is initiated when the following byte sequence is sent.
Command
Byte 0
Byte 1
Byte 2Byte 3
Byte 4
Byte 5

Subindex 0x02

Status (supported values)
0
1
2
3
255

Subindex 0x03

4.19.4

Exception ResetCommand

Subindex 0x01

0x74
0x65
0x73
0x65
0x72
0x00 = Standard reset, 0x66 = Factory Reset

Reserved
Reserved
Last command completed, error, no response
Reserved
Command is executing

Response
Byte 0See Subindex 0x02

Byte 1

UnusedByte 2…nUnusedExecution of this command clears the latched exceptions.
Index

SI

DataType

FBF1

0x01

V_STRING(5)NV

AccessPM NameRW

Command

0x02

BYTE

RO

Status0x03

V_STRING(1)RO

Response

A device reset is initiated when the following byte sequence is sent.
Command
Byte 0
Byte 1
Byte 2Byte 3
Byte 4

Subindex 0x02

Status (supported values)
0
1
2
3
255

Subindex 0x03

0x74
0x65
0x73
0x65
0x72

Last command completed, no error, no response
Reserved
Last command completed, error, no response
Reserved
Command is executing

Response
Byte 056

See Subindex 0x02

Byte 1

UnusedByte 2…nUnusedtira85e1-a(2014-10)

PxG55x.cp

4.19.5

Store Parameters
Command

Execution of this command will store all parameters to non-volatile memory. If adevice automatically saves all non-volatile parameters at the time they are set, thiscommand will not take any action.
Index
FBF2

Subindex 0x01

SI

DataType

NV

AccessPM Name0x01

V_STRING(4)RW

Command

0x02

BYTE

RO

Status0x03

V_STRING(1)RO

Response

A device reset is initiated when the following byte sequence is sent.
Command
Byte 0
Byte 1
Byte 2Byte 3Subindex 0x02

Status (supported values)
0
1
2
3
255

Subindex 0x03

(2014-10)

PxG55x.cp

Last command completed, no error, no response
Reserved
Last command completed, error, no response
Reserved
Command is executing

Response
Byte 0tira85e1-a

0x65
0x76
0x61
0x73

See Subindex 0x02

57

Appendix
A:

58

Literature [1]www.inficon.com
Operating Manual
PCG550, PCG552, PCG554
tina56d1 (German)
tina56e1 (English)
INFICON AG, LI–9496 Balzers, Liechtenstein [2]www.inficon.com
Operating Manual
PSG550, PSG552, PSG554
tina60d1 (German)
tina60e1 (English)
INFICON AG, LI–9496 Balzers, Liechtenstein [3]ETG.1000.2: Physical Layer service definition and protocol specification

 [4]ETG.1000.3: Data Link Layer service definition

 [5]ETG.1000.4: Data Link Layer protocol specification

 [6]ETG.1000.5: Application Layer service definition

 [7]ETG.1000.6: Application Layer protocol specification

 [8]ETG.1020: EtherCAT Protocol Enhancements [9]ETG.2000: EtherCAT Slave Information

 [10]

ETG.5001.1: Modular Device Profile – Part 1: General MDP DeviceModel [11]

ETG.5003.1: Semiconductor Device profile – Part 1: Common Device
Profile (CDP) [12]

ETG.5003.2080: Semiconductor Device profile – Part 2080: Specific
Device Profile (SDP): Vacuum Pressure Gauge [13]IEC 61158-x-12 (all parts for type 12): Industrial communication
networks – Fieldbus specifications

 [14]IEC 61784-2: Industrial communication networks – Profiles – Part 2:
Additional fieldbus profiles for real-time networks based on ISO/IEC
8802-3

 [15]SEMI E54 / Draft 5102A: SPECIFICATION FOR SENSOR/ACTUATORNETWORK SPECIFIC DEVICE MODEL FOR VACUUM PRESSURE
GAUGES [16]SEMI E52: Practice for referencing gases, gas mixtures and vaporizable
materials used in digital mass flow controllers

tira85e1-a(2014-10)

PxG55x.cp

Notestira85e1-a(2014-10)

PxG55x.cp

59Original: English tira85e1-a (2014-10)

t i r a85e1- a

LI–9496 Balzers
LiechtensteinTel +423 / 388 3111
Fax +423 / 388 3700
reachus@inficon.com
www.inficon.com