Functional Principle

High Pressure / Pirani Gauge
HPG400HPG400-SD
HPG400-SP

Over the whole measuring range, the measuring signal is
output as logarithm of the pressure.
The HPG400 functions with a hot cathode ionization manometer, which is controlled by the built-in Pirani manometer(control range). The hot cathode is switched on only below
the changeover threshold of ≈1 mbar (to prevent filamentburn-out). For pressures above this threshold, the Pirani signal is output.

Technical Data
In some points, the technical data of HPG400-SD
and -SP differ from those of HPG400, which are
given below (→ "Technical Data" in  [1] and [2]).
Measuring range (air, N2)
Hot cathode
Pirani (control range)
Accuracy
10-5 … 1 mbar

TrademarkDeviceNet™ Open DeviceNet Vendor Association, Inc.
Repeatability
10-5 … 10-1 mbar
10-1 … 100 mbar
Emission of hot cathode
Changeover threshold(selectable steps)

SafetyIncl. EC Declaration of Conformity

tima31e1-b

DANGER

Emission current
from 1 mbar
to
2×10–6 mbar
Anode voltage
Output signal(measuring signal)
Voltage range

0 … +10.2 V

Measuring range
Hot cathode
Pirani
Overrange hot cathode
Underrange hot cathodeOverrange Pirani
Underrange Pirani
Relationship voltage-pressure
Hot cathode
Pirani

1.5 … 7.5 V
8.5 … 9.75 V
7.5 V ≤ U ≤ 8 V
0.5 V ≤ U ≤ 1.5 V
9.75 V ≤ U ≤ 10.2 V
8 V ≤ U ≤ 8.5 V
logarithmic
1 V/decade0.25 V/decade

Error signal (→  [1])Hot cathode
Pirani≈0.3 V≈0.5 V

Minimum load impedance

10 kΩ, short-circuit proof

Gauge identification

56 kΩ between Pin 10 and
Pin 5 (sensor cable)

RS232C interface
Data rate
Data format→ "Power Connection"
9600 baud
binary8 data bits
one stop bit, no parity bit
no handshake

Information on preventing any kind of physical injury.

(2011-10)
WARNING
Information on preventing extensive equipment andenvironmental damage.

Product Identification
In all communications with INFICON, please specify the information on the product nameplate. For convenient reference copy that information into the space provided below.

CautionInformation on correct handling or use. Disregard can leadto malfunctions or minor equipment damage.

Personnel Qualifications
INFICON AG, LI-9496 Balzers

Model:PN:
SN:
V

Skilled personnelW

All work described in this document may only be carriedout by persons who have suitable technical training andthe necessary experience or who have been instructed by
the end-user of the product.

Validity

General Safety Instructions

This document applies to products with part number:• Adhere to the applicable regulations and take the necessary precautions for the process media used.
Consider possible reactions with the product materials.
Consider possible reactions (e.g. explosion) of theprocess media due to the heat generated by the product.

HPG400 (without display)353-520 (DN 25 ISO-KF)
353-522 (DN 40 CF-R)
HPG400 (with display)353-521 (DN 25 ISO-KF)
353-523 (DN 40 CF-R)
HPG400-SD (with DeviceNet interface and switching functions)353-527 (DN 25 ISO-KF)
353-528 (DN 40 CF-R)
HPG400-SP (with Profibus interface and switching functions)353-525 (DN 25 ISO-KF)
353-526 (DN 40 CF-R)
The part number (PN) can be taken from the product nameplate.
If not indicated otherwise in the legends, the illustrations inthis document correspond to the gauge with part number
353-520. They apply to the other types of the HPG400 family
by analogy.
We reserve the right to make technical changes without priornotice.
All dimensions in mm.

Intended Use
The High Pressure / Pirani Gauges of the type HPG400,
HPG400-SD and -SP gauges have been designed for vacuum measurement of gases and gas mixtures in a pressure
range of 2×10-6 … 1 mbar. The control range of the gauge
allows trend display from <1 mbar to 1000 mbar.
They must not be used for measuring flammable or combustible gases in mixtures containing oxidants (e.g. atmospheric
oxygen) within the explosion range.
The gauges can be operated in connection with the INFICON
Vacuum Gauge Controller VGC4xx or with other control devices.

±15% of reading, valid between 10-5 mbar andchangeover threshold setting(<P ↔ HP>)
(after 10 min. stabilization)±2% of reading±30% of reading

1 mbar, 5×10–1 mbar,
2×10–1 mbar, 1×10–1 mbar,
5×10–2 mbar (<P ↔ HP>)
rising continuously
4 µA
130 µA
180 VDC

Symbols Used
Instruction Sheet

2×10-6 … 1 mbar
1×10-2 … 1000 mbar

• Adhere to the applicable regulations and take the necessary precautions for all work you are going to do andconsider the safety instructions in this document.

Further information on the RS232C interface →  [1]Display panel(353-521, 353-523)
Dimensions
Pressure units

Selecting the pressure unit →  [1]Supply• Before beginning to work, find out whether any vacuum
components are contaminated. Adhere to the relevant
regulations and take the necessary precautions whenhandling contaminated parts.

DANGER
The gauge must only be connected to power
supplies, instruments or control devices that
conform to the requirements of a grounded protective extra-low voltage (SELV). The connection
to the gauge has to be fused 1).

Communicate the safety instructions to all other users.

Liability and Warranty
INFICON assumes no liability and the warranty becomes nulland void if the end-user or third parties• disregard the information in this document• use the product in a non-conforming manner• make any kind of interventions (modifications, alterationsetc.) on the product• use the product with accessories not listed in the corresponding product documentation.
The end-user assumes the responsibility in conjunction withthe process media used.
Gauge failures due to contamination or wear and tear, as
well as expendable parts (e.g. filament), are not covered by
the warranty.

LCD matrix, 32×16 pixels
with background illumination
16.0 mm × 11.2 mm
mbar (default), Torr, Pa

Voltage at gauge
Current consumption
Standard
Emission start (200 ms)
Fuse required 1)
Power consumption
Electrical connection
Sensor cable
For analog values only
For all functions
Cable length (24 VDC)

For operation with RS232(e.g. VGC4xx)

1)
2)

24 VDC (20 … 28 VDC)
2)ripple ≤2 Vpp)
≤0.5 A≤1.4 A
1.25 AT≤16 W (HPG400)
D-Sub 15-pin, male
4 conductors, shielded
7 conductors, shielded≤35 m (0.25 mm²/conductor)≤50 m (0.34 mm²/conductor)≤100 m (1.0 mm²/conductor)≤30 m

INFICON gauge controllers fulfill these requirements.
Consider the voltage drop in the supply lines.

Materials on the vacuum side
Housing, supports,
screens
Feedthroughs
Insulator
CathodeCathode holder
Pirani element
Internal volume
Pressure max.

Measuring range Pirani
stainless steel
NiFe nickel plated
glass
iridium, yttrium oxide (Y2O3)
molybdenum, platinum
tungsten, copper≤20 cm3 (DN 25 ISO-KF)≤30 cm3 (DN 40 CF-R)≤5 bar (absolute)

Admissible temperatures
Storage
Operation
Bakeout–20 … +70 °C
0 … +50 °C
150 °C (without electronics
unit, →  [1])Relative humidity
Year's mean
During 60 days
Use

≤65% (not condensable)≤85% (not condensable)indoors only
altitude up to 2000 m NN
IP 30

Degree of protection
Dimensions [mm]4-40UNC 2B

U

p

c1

c2

[V]
[V]
[V]

[mbar][Torr]
[Pa]

7.5
7.625
5.5

9
9.031
8.5

U = c2 + 0.25 log p

Vacuum Connection
DANGERWherepU
c1, c2

pressuremeasuring signal
constant (depending
on pressure unit)

Valid in range

Hot cathode
Pirani1.50 V ≤ U ≤ 7.50 V
8.50 V ≤ U ≤ 9.75 V

Gas Type Dependence
For gases other than air, the pressure in the measuring
range p < 10-1 mbar can be determined by a simple
conversion:peff = K × pressure indicatedGas type

K (mean values)

Air (N2, O2)
Xe
Kr
Ar
H2
Ne
He

1.0
0.4
0.5
0.8
2.4
4.1
5.9

DN 40 CF-R

353-520, 353-521
353-525, 353-527 3)

353-522, 353-523
353-526, 353-528 3)

Gauges with DeviceNet connector are 14 mm longer(→  [1] or [2]).

DANGER: protective ground
Incorrectly grounded products can be extremely
hazardous in the event of a fault.
The gauge must be electrically connected to thegrounded vacuum chamber. This connection
must conform to the requirements of a protective
connection according to EN 61010:

285 g
550 g
430 g
695 g

p (mbar)
102

H2

8

He

• For gauges with a KF flange, use a conductive metallic clamping ring

Air
N2
O2
CO

2
8
6
4

• CF connection fulfill this requirement

Ne

6
4

101

CO2
Ar

Indication range
above 10-2 mbar

Freon 12
Kr

2

Xe

100
8
6
4
2

10–1
8
6
4

Measuring Signal vs. Pressure
1E+03
1E+02
overrange

1E+00
1E–01

CautionCaution: vacuum component
Dirt and damages impair the function of thevacuum component.
When handling vacuum components, take appropriate measures to ensure cleanliness andprevent damages.

2

Water vapor
10–2
10–3 24 6 810–2 2Pressure p [mbar]

1E+01

DANGER: overpressure in the vacuum system>2.5 bar
KF flange connections with elastomer seals (e.g.
O-rings) cannot withstand such pressures.
Process media can thus leak and possibly
damage your health.
Use O-rings provided with an outer centeringring.

DANGER

Pirani measuring range

DN 25 ISO-KF

DANGER: overpressure in the vacuum system>1 barInjury caused by released parts and harmcaused by escaping process gases can result if
clamps are opened while the vacuum system ispressurized.
Do not open any clamps while the vacuum system is pressurized. Use the type clamps which
are suited to overpressure.

DANGERHot cathode measuring range

4-40UNC 2B

Weight353-520, 353-521
353-522, 353-523
353-525, 353-527
353-526, 353-528⇔

p = 10Where

3)Installation(4 × (U - c2))

4 6 810–1 2

4

6 8 100

2

4

6 8 1012

4

6 8 102peff (mbar)

CautionCaution: dirt sensitive area
Touching the product or parts thereof with barehands increases the desorption rate.
Always wear clean, lint-free gloves and use
clean tools when working in this area.

1E–02
1E–03
1E–04
1E–05
1E–06
0.0 0.5 1.0 1.5 2.0 2.5 3.0 3.5 4.0 4.5 5.0 5.5 6.0 6.5 7.0 7.5 8.0 8.5 9.0 9.510.0
10.2

Measuring signal U [V]The gauge may be mounted in any orientation. To
keep condensates and particles from getting into themeasuring chamber, preferably choose a horizontal
to upright position.
The gauge is supplied with a built-in baffle.

Measuring range hot cathodep = 10U - c1⇔

U = c1 + log p

t i ma 3 1 e 1 - b

Original: German tima31d1-b (2011-10)(2011-10)

• The Pirani part permanently monitors the pressure.

Remove the protective lid and install the product to thevacuum system.

Seal withcentering ring

• The hot cathode part (controlled by the Pirani) is only
switched on when the pressure drops below the changeover threshold. The hot cathode will be ready for operation
after a few seconds heating time, when the <EMI ON>
lamp is lit.

Adjustment of the Pirani part at atmospheric pressure:• When the pressure rises above the changeover threshold,the hot cathode is switched off and the <EMI ON> lamp
turns off.
In the upper pressure range, the Pirani reading and in thelower pressure range, the hot cathode reading is output.

Operate the gauge for ≈10 minutes at atmospheric pressure. If the gauge was operated
within the hot cathode range, a cooling-downtime of ≈30 minutes is to be expected (gaugetemperature = environmental temperature).

Hot cathode HP
Keep protective lid
Clamp Adjust the gauge

Pirani2 × 10-6 mbar

 Put the gauge into operation.

1000 mbar

5×10-2 mbar ... 1 mbar userdefinable changeover threshold

HPG400 without display
353-520 353-522

HPG400 with display
353-521 353-523

Insert a pin (≈ø1.3×50mm) through the opening<FULL SCALE> and push the button inside
for at least 5 seconds.

Power Connection (HPG400)
Selecting the Changeover Threshold
The following information on the electrical connection as well as the wiring diagram apply to HPG400
only (→  [1] and [2] for details on the electricalconnection and additional functions of HPG400-SD
and -SP).
Make sure the vacuum connection is properly made(→ "Vacuum Connection").

 If no sensor cable is available, make one according to
the following diagram.
HPG400

TxD

13

RxD

14

Measuring signal

2

RS232CThe HPG400 has five user-definable changeover thresholds.
It is thus possible to prevent the changeover range from being situated within the process pressure range. The factory
setting of the threshold is 1 mbar. Another changeover
threshold can be selected via the <P ↔ HP> switch. Since
the contamination of the hot cathode part is reduced at low
pressures, the lowest possible changeover threshold should
be selected.
Switch position (<P ↔ HP>)

Changeover threshold

0 or 12 or 34 or 5
6 or 7
8 or 91 mbar (factory setting)
5×10-1 mbar
2×10-1 mbar
1×10-1 mbar
5×10-2 mbar—

Automatic adjustment in progress.

≈10 s

+

Adjustment completed.

12
+U b

1.25AT
8

+

5
56kΩ

10

24 V

—

Identification

15

Electrical connection
Pin 2 Signal output (measuring signal) 0 … +10 V
Pin 5 Supply common, GND
Pin 8 Supply +24 VDC1
9
Pin 10 Gauge identifcation
Pin 12 Signal common, GND
Pin 13 RS232C, TxD
15
8
Pin 14 RS232C, RxD
Pin 15 Shielding, housing, GND
D-Sub, 15-pin
femalePins 1, 3, 4, 6, 7, 9 and 11
soldering side
are not connected internally.

 Connect the sensor cable to the gauge.
 Secure the cable connector with the lock screws.

Adjusting the Calibration Setting of the
Hot Cathode Part
Since the switch position is only polled upon activation of the gauge, the changeover threshold should
be selected before the gauge is turned on.

Adjusting the Gauge (HPG400)
The adjustment of HPG400-SD and -SP (→  [1]and [2]) is slightly different from the procedure for
HPG400, which is described below.

 Connect the sensor cable to the controller.

The gauge is factory calibrated. If used under different climatic conditions, at extreme temperatures, through aging or
contamination and after exchanging the sensor, the characteristic curve can be offset and readjustment can become
necessary. Only the Pirani element can be adjusted and only
at atmosphere.

Operation

Readjustment becomes necessary if

When the voltage is supplied, the measuring signal is available between pins 2 (+) and 12 (–) (Relationship Measuring
Signal – Pressure → "Technical Data" and  [1]).
HPG400-SD and -SP can also be operated via the corresponding fieldbus interface (DeviceNet or Profibus) (→  [1]and [2]) for further details and functions).
Allow for a stabilizing time of ≈10 minutes. Once the gauge
has been switched on, permanently leave it on irrespective of
the pressure.

Gas Type Dependence
The measurement value is gas dependent. The displayed
reading applies to dry air, O2 and N2. For other gases, it has
to be converted (→ "Technical Data" and  [1]).

Measuring Range
The HPG400 covers the measuring range
2×10-6 mbar ... 1000 mbar.

The sensor is factory calibrated. The calibration setting of the
hot cathode range 0 … F is printed on the label. Correct thisvalue with the <Cal adj> switch to adjust the electronics tothe sensor. Before operating the gauge for the first time orafter replacing the sensor, check the calibration value setting
and adjust it if necessary.

• at atmosphere the output voltage is <9.75 V or the display
reading is <atmosphere• when venting the vacuum system, the output voltage
reaches 9.75 V before the measured pressure hasreached atmosphere (Gauges with display will show theerror "5" at atmosphere (Pirani sensor warning)).

(For more details →  [1], "Maintenance, Repair").
Adjustment of the Pirani part under high vacuum
conditions:
The Pirani part is automatically adjusted by the hot cathodepart when the gauge is activated and the pressure range
1 … 3×10-3 mbar is reached for the first time.

Display(HPG400 with part numbers 353-521 and 353-523)

Pressure reading
Pressure unit

StatusParameter

Display

Description

Reading
Pressure
unit
Status0 … 1000
mbar, Torr, Pa

mbar, Torr, Pa
Factory setting: mbar

(none)E
A

Pirani operation
Emission hot cathode on
Adjustment at atmosphericpressure in progress
Normal operation, no error
Pirani sensor warning 1)
Hot cathode sensor
warning 1)
Pirani sensor error
Internal data connection
failure 1)

ok
Fail IonG 5
Fail IonG 8
Fail IonG 9
no Signal
1)

Background illumination red (in normal operation green).

Deinstallation

Returning the Product

EC Declaration of Conformity
We, INFICON, hereby declare that the equipment mentioned below complies with the provisions of the Directive relating to electromagnetic compatibility 2004/108/EC.

WARNINGWARNING: forwarding contaminated productsContaminated products (e.g. radioactive, toxic,
caustic or biological hazard) can be detrimental
to health and environment.
Products returned to INFICON should preferably
be free of harmful substances. Adhere to the forwarding regulations of all involved countries andforwarding companies and enclose a duly completed declaration of contamination 1)
1)

High Pressure / Pirani Gauge
HPG400HPG400-SD
HPG400-SP

Form under www.inficon.com

Products that are not clearly declared as "free of harmful
substances" are decontaminated at the expense of thecustomer.
Products not accompanied by a duly completed declarationof contamination are returned to the sender at his own
expense.

Standards

Harmonized and international/national standards and specifications:• EN 61000-6-2:2005 (EMC: generic immunity standard)• EN 61000-6-3:2007 (EMC: generic emission standard)• EN 61010-1:2001 (Safety requirements for electrical equipment for measurement, control and laboratory use)

• EN 61326:2006 (EMC requirements for electrical equipment

DANGERfor measurement, control and laboratory use)

DANGER: contaminated parts
Contaminated parts can be detrimental to healthand environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.

CautionCaution: vacuum component
Dirt and damages impair the function of the vacuum component.
When handling vacuum components, take appropriate measures to ensure cleanliness andprevent damages.

CautionCaution: dirt sensitive area
Touching the product or parts thereof with barehands increases the desorption rate.
Always wear clean, lint-free gloves and use
clean tools when working in this area.

 Vent the vacuum system.
 Put the gauge out of operation.
 Unfasten the lock screws and unplug the sensor cable.
(If you are using HPG400-SD or -SP, unfasten and unplug the interface connector, too (→  [1] and [2]).

Disposal
Manufacturer / Signatures

DANGERDANGER: contaminated parts
Contaminated parts can be detrimental to healthand environment.
Before beginning to work, find out whether any
parts are contaminated. Adhere to the relevant
regulations and take the necessary precautions
when handling contaminated parts.

INFICON AG, Alte Landstraße 6, LI-9496 Balzers
11 October 2011

11 October 2011

Dr. Urs Wälchli
Managing Director

Claudio Christoffel
Product Manager

WARNINGWARNING: substances detrimental to the environment
Products or parts thereof (mechanical and electric components, operating fluids etc.) can be detrimental to the environment.
Dispose of such substances in accordance withthe relevant local regulations.

Separating the components

After disassembling the product, separate its components
according to the following criteria:• Contaminated components
Contaminated components (radioactive, toxic, caustic, or
biological hazard etc.) must be decontaminated in accordance with the relevant national regulations, separated according to their materials, and recycled.
• Other components
Such components must be separated according to theirmaterials and recycled.

 Remove the gauge from the vacuum system and install
the protective lid.

Further Information
Maintenance, Repair
In case of severe contamination or a malfunction, the sensor
can be replaced (→  [1]).
Gauge failures due to contamination or wear andtear, as well as expendable parts (e. g. filament),
are not covered by the warranty.

 [1] www.inficon.com
Operating ManualHigh Pressure / Pirani Gauge
HPG400, HPG400-SD, HPG400-SP
tina31d1 German
tina31e1 English
INFICON AG, LI–9496 Balzers, Liechtenstein [2] www.inficon.com
Instruction SheetHigh Pressure / Pirani Gauge
HPG400-SD, HPG400-SP
tima32d1 German
tima32e1 English
INFICON AG, LI–9496 Balzers, Liechtenstein

LI–9496 Balzers
LiechtensteinTel +423 / 388 3111
Fax +423 / 388 3700
reachus@inficon.com
www.inficon.com