DATA SHEET
7000 Series
The 7000 Series is ideal for high volume, from medium to highpressure applications.
COMPANY: Merit Sensor is a leader in piezoresistive
pressure sensing and partners with clients to create highperforming solutions for a variety of applications and industries.

SENTIUM: Merit Sensor products incorporate a proprietary
Sentium® technology, developed to provide a
best-in-class operating temperature range (-40°C to 150°C)
and superior stability.

TECHNOLOGY: Merit Sensor utilizes a piezoresistive
Wheatstone bridge in a design that anodically bonds glass
to a chemically etched silicon diaphragm. All products
are RoHS compliant.

CAPABILITIES: Merit Sensor designs, engineers, fabricates,dices, assembles, and tests products from a state-of-the-art
facility near Salt Lake City, Utah.

7000 Series Part Number Configurator

FEATURES
Range

15 to 10000 psi (1 to 689 bar; 103 to 68967 kPa)

Type

Absolute, gage, differential and vacuum

Media

Clean, dry air and non-corrosive gases

Shipping

Wafers on tapeFlexibility

Sensitivity, resistance, bridge, constraint, etc.

BENEFITS

Impedance
7 = 5kohm Bridge
8 = 3.5kohm BridgeXXX-XXXX-XTS = Al Field-shield
P = PolySi
Field-Shield
BridgeO = OpenH = 1/2 OpenC = Closed

Performance Enjoy best-in-class performance due to Merit’s
proprietary Sentium technology.
Cost

Save money over time with high-performing die

Security

Feel confident doing business with an experienced
company backed by a solid parent company(NASDAQ: MMSI)

Speed

Get to market quickly with creative andflexible solutions.

ServiceExperience prompt, personal, andprofessional support.

Constraint
5 = 0.5mm Absolute
9 = 0.5mm Gage
μV/V/psi
1000 = 15 psi
0500 = 50 psi
0300 = 100 psi
0100 = 300 psi
0070 = 500 psi
0030 = 1000 psi
0012 = 3000 psi
0007 = 5000 psi
0003 = 10000 psi

Example: 7SO-0300-9T offers 5kohm Impedance,Open Bridge,100psi and Gage Constraint
Note:
1. “T” in part number = sawn wafer on tape in metal frame.
2. Poly Fs is only available for sensitivities of 30 and below.

Sales +1 801.208.4722 · Customer Service +1 801.208.4700 · Fax +1 801.208.4798 · sensors@merit.com · www.MeritSensor.com
1600 W. Merit Parkway · South Jordan, Utah · 84095 · USA

7000seriesDS.005

7000 Series
SPECIFICATIONSParameter

Minimum

TypicalMaximum

Units

Notes

515V

Maximum: 3 mA

5000

6000

Ω

Optional: 3,500 +/- 500
Sentium® technology

Electrical & Environmental
Excitation (In)
Impedance

4000

Operating Temperature-40150°C

Storage Temperature

-55

160°C

Performance
Offset-10010mV/V

Zero pressure; gage only; @25°C

Non-linearity

-0.2

00.2

% FSO

Best Fit Straight Line; @25°C

Pressure Hysteresis

-0.1

00.1

% FSO

@25°C

Temp Coeff – Zero-25025μV/V/°C-40°C to 150°C

Temp Coeff – Resistance2300

2800

3300

PPM/°C-40°C to 150°C

Temp Coeff – Sensitivity

-1500

-2200

-2500

PPM/°C-40°C to 150°C
Zero pressure 25°C to 125°C

Thermal Hysteresis<0.2± % FSO

Long-Term Stability<0.2± % FSO

Burst Pressure

3X

Full scale pressure

Full-Scale Output (@ 5 volts excitation)
15 psi (1 bar; 103 KPa)

60

7590mV50 psi (3.4 bar; 345 KPa)

100

125150mV

100 psi (6.9 bar; 689 KPa)

120

150180mV

300 psi (20.7 bar; 2,068 KPa)

120

150180mV

500 psi (34.5 bar; 3,447 KPa)

140175210mV

1000 psi (68.9 bar; 5,895KPa)
0.61200.9150

180

3000 psi (206.9 bar; 20,684 KPa)

1401752105000 psi (344.7 bar; 34,474 KPa)

140

175

210

10000 psi (689.5 bar; 68,948 KPa)

0.5120150180

15mV

V+OUT

4mV
mV
V+IN V+IN V+IN
81mV

526V-IN V-IN

ELECTRICAL

Standard Bond Pad Metallization = Aluminum

V-OUT 34PV+OUT

Open

V+IN V+IN
10.9 720.673 0.51

V-IN

0.52V+IN V+IN V+IN

638 V-OUT
51V-IN V-IN

4V+IN V+IN V+INV-OUT

48581356-IN-IN

Half V-OUT 76P0.18

470.530.46

V-IN V-IN

0.41

71.62.2

123 0.51

Absolute also; other constraints available

40.9
560.50.18

V+OUT

620.4182V+OUTV
V+OUT
V4V-OUT 3

0.6

50.41

1.6

1V+IN V+IN

V-OUT 3

DIMENSIONS (millimeters, post-cut)

0.53
0.46

Other outputs available
upon request

V-IN

72V+IN V+IN V+IN

681V-IN V-IN

Note: Bridge output bondpads (V-out and V+out)correspond to top side
pressure. For back side
pressure, the bridge
V-OUT 3outputs are reversed.

15V-OUT

34Closed

4V+OUT
6V-IN V-IN

72.2

V+OUT

V-OUT 720.41

5V+IN V+IN

V+IN V+IN V+IN

V-IN V-IN
Sales +1 801.208.4722 · Customer Service +1 801.208.4700 · Fax +1 801.208.4798 · sensors@merit.com· www.MeritSensor.com
185261600 W. Merit Parkway · South Jordan, Utah · 84095 · USAP