DATA SHEETExample Transfer Function (Sensor pn 140X-P15D-11):

Vout = (250* P) + Offset ± Error
Example Transfer Function (Sensorpn 140X-P15D-11):
This graph
Vout =assumes(250 * P) +offset
Offset =± 0mV,Error error = 0mV, Vs = 5.0V, and TEMP = 25°C

LP Series – UncompensatedThis graph assumes offset = 0mV, error = 0mV, Vs = 5.0V, and TEMP = 25°C

404035

LP Series - Uncompensated is a surface mountable pressure sensor package withan uncompensated output suitable for ultra-low pressure sensing applications.

35

30
25

20

15

10

Output (milliVolts)

Output (milliVolts)

30

COMPANY: Merit Sensor is a leader in piezoresistive

25

pressure sensing and partners with clients to create highperforming solutions for a variety of applications and industries.

20

SENTIUM: Merit Sensor products incorporate a proprietary*Example: When using the 140X-P15D-11,
the typical output at 1" H2O (0.036psi) = 9.0mV

15Sentium® technology developed to provide a best-in-class operating
temperature range (-40°C to 85°C) and superior stability.

5*Example: When using the 140X-P15D-11,
the typical output at 1" H2O (0.036psi) = 9.0mV10000.01

0.02

0.03

0.04

0.05

0.06

0.07

0.08

0.09

0.10

0.11

0.12

0.13

0.14

0.15

TECHNOLOGY: Merit Sensor utilizes a piezoresistive Wheatstonebridge in a design that anodically bonds glass to a chemically etchedsilicon diaphragm. All products are RoHS compliant.

0.16

Pressure (psig)

5

CAPABILITIES: Merit Sensor designs, engineers, fabricates, dices,000.01

0.02

0.03

0.04

0.05

0.06

0.07

0.080.09

0.10

0.11

0.12

0.13

0.14

0.15

Pressure (psig)

0.16

assembles, tests, sells and services die and packaged products froma state-of-the-art facility near Salt Lake City, Utah

FEATURES
Low Pressure 0.15 to 1 psi (10.3 to 68.9 mbar; 1.03 to 6.89 KPa;
Range
4.2 to 27.7 inH2O)
MediumPressureRange

5 psi to 30 psi (0.34 to 2.1 bar; 34.5 to 207 KPa)

Type

Differential (and Absolute at 15psi and 30psi)

Media

Clean, Dry Air and Non-corrosive Gases

Packaging

Tape and Reel

Customization Sensitivity, Resistance, Bridge, Constraint, etc.

Merit Sensor owns and operates a MEMS wafer fab, which enables the production ofcustomized piezoresistive pressure sensors for medical, industrial, and automotive applications.
We help you get to market quickly with creative and flexible solutions and provide prompt,
personal, and professional customer support.

Sales +1 801.208.4722 · Customer Service +1 801.208.4700 · Fax +1 801.208.4798 · sensors@merit.com · www.MeritSensor.com
1600 W. Merit Parkway · South Jordan, Utah · 84095 · USA

1400 Family Part Number Configurator
Bridge01 = Open
02 = Closed

14XX-XXXX- XX

Pressure
P15 = .15psi
P30 = .30psi
1P0 = 1.0psi
005 = 5.0psi
015 = 15psi
030 = 30psi

BENEFITS
Performance Enjoy best-in-class performance due to Merit’s
proprietary Sentium technology
Cost

Save money over time with high-performing die

Security

Feel confident doing business with an experienced
company backed by a solid parent company(NASDAQ: MMSI)

Speed

Get to market quickly with creative andflexible solutions

ServiceExperience prompt, personal andprofessional support

Pin Type
1 = J-leadPort
1 = Dualhorizontal, facingsame side
Reference
D = Differential
A = Absolute (15 and30 psi only)

Sales +1 801.208.4722 · Customer Service +1 801.208.4700 · Fax +1 801.208.4798 · sensors@merit.com · www.MeritSensor.com
1600 W. Merit Parkway · South Jordan, Utah · 84095 · USA

1400seriesDS.007

LP Series – Uncompensated
CROSS SECTION FOR DIFFERENTIALMEMS sensing element(differential pressure)

SPECIFICATIONSParameter

CROSS SECTION FOR ABSOLUTE

Minimum

Soft die attach material

Cover/mechanical protection

TypicalMaximum

Units

Notes

515V

Maximum: 3mA

50006000ΩElectricalExcitation (In)
Impedance

4000

Operating Temperature-4085°C

Storage Temperature

-55

100°C

Media inlet ports

Performance (0.15psi to 1.00psi)
Offset-10010mV/V

Zero Pressure; gage only; @25°C

Non-linearity

-0.25

00.25

% FSO

Best Fit Straight Line; @25°C

Pressure Hysteresis

-0.1

00.1

% FSO

@25°C

Temp Coeff – Zero

-20

020μV/V/°C-25°C to 75°C

Temp Coeff – Resistance

2000

2500

3000

PPM/°C-25°C to 75°C

Temp Coeff – Sensitivity

-2500

-3000

-3500

PPM/°C-25°C to 75°C

Temp Coeff – Sensitivity

-2000

-2500

-3000

PPM/°C-25°C to 75°C

Long-Term Stability-0.25

00.25% FSO@125°C

Proof Pressure

5X

Burst Pressure

10psi(0.15psi)(0.2psi – 1psi)

Electrical connections

SENSOR BRIDGE Pin-out

PACKAGING
16.0mmV+IN V+IN
5Full scale pressure

1OPEN

32.0mmPerformance (5psi to 30psi)
Offset-10010mV/V

Zero pressure; gage only; @25°C

Non-linearity-0.25

00.25% FSO

Best Fit Straight Line; @25°C

Pressure Hysteresis-0.1

00.1% FSO

@25°C

Temp Coeff – Zero-20020μV/V/°C-40°C to 85°C

Temp Coeff – Resistance

2500

3100

3500

PPM/°C-40°C to 85°C

Temp Coeff – Sensitivity

-1500

-2000

-2500

PPM/°C-40°C to 85°C

Long-Term Stability-0.100.1% FSO

Burst Pressure

10X

V-OUT 4

2.0mm
4.0mm

30

DIMENSIONS (millimeters)
2.5
2.5

Full scale pressure

0.30psi (8.3 inH2O; 2.1 KPa)

36

1.00psi (27 inH2O; 6.9 KPa)

4037.5
4550

60
5460

-IN-IN
883.7
3.7

2.5
2.52.52.5mV77668+IN+IN
55107133160mV15 psi (1 bar; 103 KPa)

120150180mV

30 psi (2.1 bar; 207 KPa)

128

160192mV
2.5Media Compatibility

For Use with non-corrosive dry gases
Solder temperature: max 250 °C, 5 seconds max

8-IN8

1.3
1.3

3.7

2.5

2.5

76+IN+IN
11+O+O
22-IN-IN
33

12

1.9
1.9-O-O446

SMT Landing Pad Layout
SMT Landing Pad Layout

55

2.1
13.4

8.5

12.1

11.4

12.5

1.3+IN+O-IN-O

1234

SMT Landing Pad Layout

1.92342.5

2.5
2.510.362310.3
10.3+IN
7765512.1
12.1

12.5
2.5713.4
13.4

11.4
11.4mV82.12.1mV

5 psi (0.34 bar; 34.5 KPa)

38V-IN V-IN

Full Scale Output (@ 5 volts)

0.15psi (4 inH2O; 1.03 KPa)

2344Device
Pinout OpenClose

P1+IN+IN

P2+O+O

P3-IN-IN

8.5P48.5-O-O

P5+IN

N/C

P6N/C

N/C

P7N/C

P8

2.5
2.5 -IN
2.52.5N/C

2.52.5 N/C

V+OUT

LP Series – Uncompensated
CROSS SECTION FOR DIFFERENTIALMEMS sensing element(differential pressure)

SPECIFICATIONSParameter

CROSS SECTION FOR ABSOLUTE

Minimum

Soft die attach material

Cover/mechanical protection

TypicalMaximum

Units

Notes

515V

Maximum: 3mA

5000

6000

ΩElectrical
Excitation (In)
Impedance

4000

Operating Temperature

-40

85°C

Storage Temperature

-55

100°C

Media inlet ports

Performance (0.15psi to 1.00psi)
Offset-10010mV/V

Zero Pressure; gage only; @25°C

Non-linearity

-0.25

00.25

% FSO

Best Fit Straight Line; @25°C

Pressure Hysteresis-0.100.1% FSO@25°CTemp Coeff – Zero

-20

020μV/V/°C-25°C to 75°C

Temp Coeff – Resistance

2000

2500

3000

PPM/°C-25°C to 75°C

Temp Coeff – Sensitivity

-2500

-3000

-3500

PPM/°C-25°C to 75°C

Temp Coeff – Sensitivity

-2000

-2500

-3000

PPM/°C-25°C to 75°C

Long-Term Stability

-0.25

00.25

% FSO

@125°C

Proof Pressure

5X

Burst Pressure

10psi(0.15psi)(0.2psi – 1psi)

Electrical connections

SENSOR BRIDGE Pin-out

PACKAGING
16.0mmV+IN V+IN
5Full scale pressure

1OPEN

32.0mmPerformance (5psi to 30psi)
Offset-10010mV/V

Zero pressure; gage only; @25°C

Non-linearity-0.25

00.25% FSO

Best Fit Straight Line; @25°C

Pressure Hysteresis-0.1

00.1% FSO

@25°C

Temp Coeff – Zero-20

020μV/V/°C-40°C to 85°C

Temp Coeff – Resistance

2500

3100

3500

PPM/°C-40°C to 85°C

Temp Coeff – Sensitivity

-1500

-2000

-2500

PPM/°C-40°C to 85°C

Long-Term Stability

-0.1

00.1

% FSO

Burst Pressure

10X

V-OUT 4

2.0mm
4.0mm

30

DIMENSIONS (millimeters)
2.52.5Full scale pressure

0.30psi (8.3 inH2O; 2.1 KPa)

36

1.00psi (27 inH2O; 6.9 KPa)

40

37.5
45
5060
5460-IN-IN
883.7
3.7

2.5
2.5

2.52.5mV

77668+IN+IN
55107

133160mV

15 psi (1 bar; 103 KPa)

120

150

180mV

30 psi (2.1 bar; 207 KPa)

128

160

192mV
2.5Media Compatibility

For Use with non-corrosive dry gases
Solder temperature: max 250 °C, 5 seconds max

8-IN
8

1.3
1.3

3.7

2.5

2.5

76+IN+IN
11+O+O
22-IN-IN33

12

1.91.9-O-O446

SMT Landing Pad Layout
SMT Landing Pad Layout

55

2.1
13.4

8.5

12.1

11.4

1
2.5

1.3+IN+O-IN-O

1234

SMT Landing Pad Layout

1.9234

2.5

2.5
2.5

10.3

623

10.3
10.3+IN
7

7655

12.1
12.1

1
2.5
2.5

7

13.4
13.4

11.4
11.4

mV

82.1
2.1mV5 psi (0.34 bar; 34.5 KPa)

38V-IN V-IN

Full Scale Output (@ 5 volts)

0.15psi (4 inH2O; 1.03 KPa)

2344Device
Pinout OpenClose

P1+IN+INP2+O+OP3-IN-IN

8.5P48.5-O-O

P5+IN

N/C

P6N/C

N/C

P7N/C

P82.5
2.5 -IN
2.5
2.5N/C

2.5
2.5 N/CV+OUT

DATA SHEETExample Transfer Function (Sensor pn 140X-P15D-11):

Vout = (250* P) + Offset ± Error
Example Transfer Function (Sensorpn 140X-P15D-11):
This graph
Vout =assumes(250 * P) +offset
Offset =± 0mV,Error error = 0mV, Vs = 5.0V, and TEMP = 25°C

LP Series – UncompensatedThis graph assumes offset = 0mV, error = 0mV, Vs = 5.0V, and TEMP = 25°C

404035

LP Series - Uncompensated is a surface mountable pressure sensor package withan uncompensated output suitable for ultra-low pressure sensing applications.

3530
25

2015

10Output (milliVolts)

Output (milliVolts)

30

COMPANY: Merit Sensor is a leader in piezoresistive

25

pressure sensing and partners with clients to create highperforming solutions for a variety of applications and industries.

20

SENTIUM: Merit Sensor products incorporate a proprietary*Example: When using the 140X-P15D-11,the typical output at 1" H2O (0.036psi) = 9.0mV15Sentium® technology developed to provide a best-in-class operating
temperature range (-40°C to 85°C) and superior stability.

5*Example: When using the 140X-P15D-11,
the typical output at 1" H2O (0.036psi) = 9.0mV

1000

0.01

0.02

0.03

0.04

0.05

0.06

0.07

0.08

0.09

0.10

0.11

0.12

0.13

0.14

0.15

TECHNOLOGY: Merit Sensor utilizes a piezoresistive Wheatstonebridge in a design that anodically bonds glass to a chemically etchedsilicon diaphragm. All products are RoHS compliant.

0.16

Pressure (psig)

5CAPABILITIES: Merit Sensor designs, engineers, fabricates, dices,

00

0.01

0.02

0.03

0.04

0.05

0.06

0.07

0.08

0.09

0.10

0.11

0.12

0.13

0.14

0.15

Pressure (psig)

0.16

assembles, tests, sells and services die and packaged products froma state-of-the-art facility near Salt Lake City, Utah

FEATURES
Low Pressure 0.15 to 1 psi (10.3 to 68.9 mbar; 1.03 to 6.89 KPa;
Range
4.2 to 27.7 inH2O)
MediumPressureRange

5 psi to 30 psi (0.34 to 2.1 bar; 34.5 to 207 KPa)

TypeDifferential (and Absolute at 15psi and 30psi)

Media

Clean, Dry Air and Non-corrosive Gases

Packaging

Tape and Reel

Customization Sensitivity, Resistance, Bridge, Constraint, etc.

Merit Sensor owns and operates a MEMS wafer fab, which enables the production ofcustomized piezoresistive pressure sensors for medical, industrial, and automotive applications.
We help you get to market quickly with creative and flexible solutions and provide prompt,
personal, and professional customer support.

Sales +1 801.208.4722 · Customer Service +1 801.208.4700 · Fax +1 801.208.4798 · sensors@merit.com · www.MeritSensor.com
1600 W. Merit Parkway · South Jordan, Utah · 84095 · USA

1400 Family Part Number Configurator
Bridge01 = Open
02 = Closed

14XX-XXXX- XX

Pressure
P15 = .15psi
P30 = .30psi
1P0 = 1.0psi
005 = 5.0psi
015 = 15psi
030 = 30psi

BENEFITS
Performance Enjoy best-in-class performance due to Merit’s
proprietary Sentium technology
Cost

Save money over time with high-performing die

Security

Feel confident doing business with an experiencedcompany backed by a solid parent company(NASDAQ: MMSI)

Speed

Get to market quickly with creative andflexible solutions

ServiceExperience prompt, personal andprofessional support

Pin Type
1 = J-leadPort
1 = Dualhorizontal, facingsame sideReference
D = Differential
A = Absolute (15 and30 psi only)

Sales +1 801.208.4722 · Customer Service +1 801.208.4700 · Fax +1 801.208.4798 · sensors@merit.com · www.MeritSensor.com
1600 W. Merit Parkway · South Jordan, Utah · 84095 · USA

1400seriesDS.006