IRG080
Ion Reference Gauge - Passive
The INFICON Ion Reference Gauge IRG080 is a first-ofa-kind vacuum sensor developed for precise totalpressure measurement in vacuum systems. Thispassive sensor is based on an innovative concept ofionization vacuum gauge, whereby a hot cathode emits
electrons travelling on a straight path into a Faradaycup.
The IRG080 is suitable as reference standard in therange of 10-8 mbar (10-6 Pa) to 10-4 mbar (10-2 Pa). Thisgauge offers predictable gas sensitivity with a verysmall spread, very good short-term repeatability andreproducibility. The gauge can be used for calibration
purposes of other vacuum gauges and quadrupole
mass spectrometers. It is ideal for precise vacuum
measurement in industrial applications pursuing nocalibration or process readjustments after a gauge
exchange. The IRG080 is connected and controlled by
the IRC081 operating unit.

ADVANTAGES• Developed for applications requiring high measurement accuracy in the high and ultra-high vacuum range• True pressure for all gas species thanks to predictable relative gas sensitivity with small uncertainty• Stable electron emission and lack of influence from ESD or X-ray effects• Reproducible and easy to transport• Bakeable to 165 °C (with temperature resistant cable) or up to 400 °C without connector unit
• Mu-metal intermediate piece available for magnetic shielding purposes
APPLICATIONS• Metrology, transfer standards to national and calibration laboratories• Advanced scientific and industrial applications requiring precise vacuum pressure measurement for quality
assurance• Calibration of other vacuum gauges and mass spectrometers, pump speed measurement
OPERATING UNITS• Ion Reference gauge Controller IRC081

IRG0801

IRG080
ORDERING INFORMATIONTypeSensor, with BNC and multipin connector, DN 63 CF-RSensor, with BNC and multipin connector, DN 63 CF-F,
with mu-metal intermediate piece

IRG080399-874399-875

Accessories
Replacement cathodeMu-metal intermediate piece, DN 63 CF-F (incl. protection grid)Protection grid for intermediate piece

IRG080399-890399-891399-892

IRG0802

IRG080
SPECIFICATIONS
Type
Measurement system
Electrode system configuration
Measurement range (N2) with IRC081 controller
Sensitivity (N2, typical)
Accuracy (N2, typical)
Repeatability (typical)
Mounting orientation
with mu-metal int. piece (399-891)
Admissible temperature
Ambient, in operation
Bake-out
max. flange with temp. resistant gauge head cable set
max. bake-out temp. without plug and connector plate unit
max. bake-out temp. without plug and connector plate unit withmu-metal int. piece (399-891)
Storage
Relative humidity
Admissible external magnetic fieldin the plane normal to gauge axis, without shielding
UseStandard operating characteristics with IRC081 controller
Collector potential
Cathode potential
Wehnelt potential
Anode potential
Deflector potential
Faraday cup potential
Emission current range
Cathode heater current / voltage (typ.)Flange connection
Gauge connections
Ion collector
Interface to Sensor (IS)Materials exposed to vacuum
Feedthrough pins
Feedthrough caps
Feedthrough isolation
CathodeAnodeWehnelt cylinder
FlangeInternal volumeWeight1)

Orientation should be such that magnetic field is not perpendicular to the electron trajectory

IRG080
3IRG080
hot cathode ionizationaccording ISO TS 6737
<1 × 10-8 … 1 × 10-4 mbar
<1 × 10-6 … 1 × 10-2 Pa
29 mbar -1± 1% of reading
1% of reading
recommended aligned with magnetic field 1)
any+20 … +80 °C+165 °C+400 °C+200 °C+20 … +50 °C≤ 85% (non-condensing)≤50 µT
indoors only

0V
+50 V
+34 V
+250 V
45 V+280 V
10 ... 100 µA
1.4 ... 1.8 A / 2 V
DN 63 CF-R
Bayonet (BNC)
Push-pull self-latching, 7-pin
stainless steel (EN 1.4301)
NiFeCo (EN 1.3981)
ceramic (Al2O3)
Ta, W, Kovar, Al2O3
stainless steel (EN 1.4404, EN 1.4435)
stainless steel (EN 1.4404, EN 1.4435)
stainless steel (EN 1.4335 ESU)
~385 cm3
4.3 kgIRG080
DIMENSIONS[mm]

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reachus@inficon.com

Due to our continuing program of product improvements, specifications are subject to change without notice.
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