O

P

E

R

A

T

I

N

G

Quantus™ LP100
Gas Analysis System
IPN 074-510-P1B

M

A

N

U

A

L

O

P

E

R

A

T

I

N

G

M

A

N

U

Quantus™ LP100
Gas Analysis System
IPN 074-510-P1B®

www.inficon.com

re achus@inficon.com

Due to our continuing program of product improvements, specifications are subject to change without notice.
©2011 INFICON

A

L

Trademarks
The trademarks of the products mentioned in this manual are held by the companies that
produce them.
INFICON®, FabGuard® and Quantus™ are trademarks of INFICON GmbH.
Oracle® and Java™ are registered trademarks of Oracle and/or its affiliates.
Windows®, is a registered trademarks of Microsoft Corporation.
All other brand and product names are trademarks or registered trademarks of their respective companies.

Disclaimer
The information contained in this manual is believed to be accurate and reliable. However, INFICON assumes
no responsibility for its use and shall not be liable for any special, incidental, or consequential damages related
to the use of this product.
Due to our continuing program of product improvements, specifications are subject to change without notice.

Copyright©2011 All rights reserved.
Reproduction or adaptation of any part of this document without permission is unlawful.

Warranty
WARRANTY AND LIABILITY - LIMITATION: Seller warrants the products
manufactured by it, or by an affiliated company and sold by it, and described on
the reverse hereof, to be, for the period of warranty coverage specified below, freefrom defects of materials or workmanship under normal proper use and service.
The period of warranty coverage is specified for the respective products in therespective Seller instruction manuals for those products but shall not be less thanone (1) year from the date of shipment thereof by Seller. Seller's liability under thiswarranty is limited to such of the above products or parts thereof as are returned,
transportation prepaid, to Seller's plant, not later than thirty (30) days after the
expiration of the period of warranty coverage in respect thereof and are found bySeller's examination to have failed to function properly because of defective
workmanship or materials and not because of improper installation or misuse andis limited to, at Seller's election, either (a) repairing and returning the product orpart thereof, or (b) furnishing a replacement product or part thereof, transportation
prepaid by Seller in either case. In the event Buyer discovers or learns that a
product does not conform to warranty, Buyer shall immediately notify Seller inwriting of such non-conformity, specifying in reasonable detail the nature of suchnon-conformity. If Seller is not provided with such written notification, Seller shallnot be liable for any further damages which could have been avoided if Seller had
been provided with immediate written notification.
THIS WARRANTY IS MADE AND ACCEPTED IN LIEU OF ALL OTHERWARRANTIES, EXPRESS OR IMPLIED, WHETHER OF MERCHANTABILITY OR
OF FITNESS FOR A PARTICULAR PURPOSE OR OTHERWISE, AS BUYER'S
EXCLUSIVE REMEDY FOR ANY DEFECTS IN THE PRODUCTS TO BE SOLDHEREUNDER. All other obligations and liabilities of Seller, whether in contract or
tort (including negligence) or otherwise, are expressly EXCLUDED. In no event
shall Seller be liable for any costs, expenses or damages, whether direct orindirect, special, incidental, consequential, or other, on any claim of any defective
product, in excess of the price paid by Buyer for the product plus returntransportation charges prepaid.
No warranty is made by Seller of any Seller product which has been installed,
used or operated contrary to Seller's written instruction manual or which has been
subjected to misuse, negligence or accident or has been repaired or altered byanyone other than Seller or which has been used in a manner or for a purpose forwhich the Seller product was not designed nor against any defects due to plans or
instructions supplied to Seller by or for Buyer.
This manual is intended for private use by INFICON® Inc. and its customers.
Contact INFICON before reproducing its contents.
NOTE: These instructions do not provide for every contingency that may arise inconnection with the installation, operation or maintenance of this equipment.
Should you require further assistance, please contact INFICON.

www. inficon.com

re achus@inficon.com

Quantus LP100 Operating Manual

Table Of Contents
Trademarks
Disclaimer
Copyright
Chapter 1

IPN 074-510-P1B

Introduction
1.1
1.2
1.2.1
1.2.2
1.2.3
1.3
1.4
1.4.1
1.5
1.6
1.7
1.8
1.8.1
1.8.2
1.8.3
1.8.4
1.9
1.9.1
1.9.1.1

System Overview . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
Safety . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1
Definition of Notes, Cautions and Warnings. . . . . . . . . . . . . . . . . . . . . . . . . 1-1
Before You Begin . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
General Warnings and Cautions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-2
Terminology . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-3
How To Contact Customer Support . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
Returning Your Instrument to INFICON . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-4
Purpose of the Quantus LP100 Gas Analysis System . . . . . . . . . . . . . . . . . 1-5
Computer System Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Operating System Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Description of the Quantus LP100 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-5
LP100 Sensor Overview. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-6
LP100 Microplasma Sensor Cell . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
LP100 Electronic Control Module . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-7
AUX I/O Connector. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
Auxiliary I/O Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
Mechanical . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8

1.9.1.2

Electrical . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8

1.9.1.2.1

Digital I/O . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8

1.9.1.2.2

Relay . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8

1.9.1.2.3

Valve Driver . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8

1.9.2
1.10

Auxiliary I/O Pin Designations . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-8
Quantus LP100 Specifications . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-9

TOC - 1

Quantus LP100 Operating Manual

Chapter 2
Theory
2.1
2.2
2.3
2.3.1
2.3.2
2.4

Introduction to Optical Emission Spectroscopy . . . . . . . . . . . . . . . . . . . . . . 2-1
Origin of Optical Emission Theory . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1
Complex Optical Emission Spectra . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
Increasing Numbers of Electrons . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-3
Molecular Combinations of Atoms . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-4
Quantus and Optical Emission Spectroscopy . . . . . . . . . . . . . . . . . . . . . . . 2-4

Chapter 3
Installation
3.1
3.1.1
3.1.1.1

Installation of the Quantus LP100 . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
LP100 Installation Requirements . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1
LP100 Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1

3.1.2
3.1.3
3.1.4
3.2

Installation Comments . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2
Cleaning . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
Connecting the USB Interface . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-3
LP100 Installation. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-4

Chapter 4
Operation
4.1
4.2
4.2.1
4.3

Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
Sensor Status LEDs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
Descriptions of Sensor Status LEDs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1
Spread-Spectrum (SS) . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2

Accessories and Spare Parts
5.1
5.2
5.2.1
5.2.2

LP100 Spare Parts . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
LP100 Accessories. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
USB to Ethernet Kit . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1
Isolation Valve Kit. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1

Chapter 6
Maintenance
6.1
6.2

TOC - 2Introduction. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1
Replacing the Microplasma Sensor Cell (MSC) . . . . . . . . . . . . . . . . . . . . . . 6-1

IPN 074-510-P1B

Chapter 5

Quantus LP100 Operating Manual

Chapter 1
Introduction
1.1 System Overview
INFICON Quantus™ LP100 gas analysis system operates using the principal of
optical emission spectroscopy. A gas sample or gas-flow of interest is presented toa proprietary Microplasma Sensor Cell inside the sensor that excites the gas,causing it to produce a plasma. The light emitted by the plasma has a spectrum
that provides information about the atoms and molecules present. The opticalemission is detected by a spectrometer inside the sensor. The resulting spectra are
analyzed by INFICON FabGuard™ analysis software on a control computer.

1.2 Safety
The LP100 generates high voltages, radio-frequency signals, and light (ultra-violet,
visible, and infrared light). Aside from a field-replaceable Microplasma Sensor Cell,
the LP100 has no user-serviceable parts.

WARNINGTo prevent injury, and to prevent voiding the factory
warranty, repairs to the LP100 should only be performed
by factory-authorized personnel.

IPN 074-510-P1B

1.2.1 Definition of Notes, Cautions and Warnings
When using this manual, please pay attention to the NOTES, CAUTIONS andWARNINGS found throughout. For the purposes of this manual they are defined asfollows:
NOTE: Pertinent information that is useful in achieving maximum instrument
efficiency when followed.

CAUTION
Failure to heed these messages could result in damage
to the instrument.

WARNING
Failure to heed these messages could result in personal
injury.

1-1

Quantus LP100 Operating Manual

1.2.2 Before You Begin
1 REVIEW the installation process thoroughly before beginning work.
2 CONFIRM that the sensor materials of construction and surfaces arecompatible with the exposed process environment.

3 CONFIRM that the sensor is installed in an approved manner.

1.2.3 General Warnings and Cautions
WARNING
NEVER operate the sensor without its protective
enclosures. The sensor should only be powered when
fully mounted using the KF vacuum flange interface to an
appropriate system to be monitored.

WARNING
NEVER install or power the sensor in a position where auser can physically access, or view directly the
microplasma.

WARNINGWARNING
NEVER view directly the microplasma discharge.

CAUTION
NEVER operate the sensor when the interior of the
microplasma sensor cell is exposed to ambient or othersources of light such as other processes.

1-2

IPN 074-510-P1B

NEVER touch the microplasma source or its assembly
within its containment cavity.

Quantus LP100 Operating Manual

CAUTION
NEVER prevent airflow by blocking the vent holes or thecooling fan on the sensor. Unpredictable results or
damage to the sensor may result.

CAUTION
NEVER power the sensor with an unapproved power
supply.

1.3 Terminology
In describing the use of the sensor in this guide, the following terms will be used:
Sensor: A complete LP100 sensor that includes an Electronic Control Module(ECM) and Microplasma Sensor Cell (MSC).
Electronic Control Module (ECM): The ECM contains a spectrometer andelectronics. This unit is powered by a 24 V (dc) 2.5 A supply.
Microplasma Sensor Cell (MSC): The MSC contains the microplasma lightsource. The MSC is field-replaceable.
Software: Quantus is operated by INFICON FabGuard analysis software runningon an INFICON FabGuard Controller or Windows®-based PC.

IPN 074-510-P1B

Controller: The computer running INFICON FabGuard analysis software tooperate Quantus is an INFICON FabGuard Controller or Windows-based PC.
Tool or Process Tool: A process tool or other system onto which the sensor is
attached. The sensor should only be used when properly installed onto an
appropriate vacuum system or process tool.

1-3Quantus LP100 Operating Manual

1.4 How To Contact Customer Support
Worldwide support information regarding:Technical Support, to contact an applications engineer with questions
regarding INFICON products and applications, orSales and Customer Service, to contact the INFICON Sales office nearest you,or

Repair Service, to contact the INFICON Service Center nearest you,is available at www.inficon.com.
If you are experiencing a problem with your instrument, please have the following
information readily available:the serial number for your instrument,a description of your problem,an explanation of any corrective action that you may have already attempted,

and the exact wording of any error messages that you may have received.

To contact Customer Support, see Support at www.inficon.com.

1.4.1 Returning Your Instrument to INFICON
Do not return any component of your instrument to INFICON without first speaking
with a Customer Support Representative. You must obtain a Return Material
Authorization (RMA) number from the Customer Support Representative.

Prior to being given an RMA number, you will be required to complete a Declaration
Of Contamination (DOC) form to identify what process materials your instrument
has been exposed. DOC forms must be approved by INFICON before an RMA
number is issued. INFICON may require that the instrument be sent to a
designated decontamination facility, not to the factory.

1-4

IPN 074-510-P1B

If you deliver a package to INFICON without an RMA number, your package will beheld and you will be contacted. This will result in delays in servicing yourinstrument.

Quantus LP100 Operating Manual

1.5 Purpose of the Quantus LP100 Gas Analysis System
The Quantus LP100 detects changes in gas characteristics such as composition,pressure or concentration. Detecting such changes allows the user to detect leaks,
contaminants and process endpoints in critical process environments.

1.6 Computer System Requirements
The Quantus gas analysis system utilizes INFICON FabGuard analysis softwarewith the following computer system requirements.
Table 1-1 Computer System Requirements

Minimum Requirement

Recommended

Processor

Intel Pentium 4, 3 GHzIntel Core 2 or greater

Memory

1 GB

2 GB or greater

Hard Drive

80 GB

160 GB or greater

Resolution15" (1024 x 768)17" (1280 x 1024)

1.7 Operating System Requirements
INFICON FabGuard analysis software requires Windows XP Operating System orhigher.

IPN 074-510-P1B

Quantus requires the Java™ Runtime Engine, Version 6. Many computers alreadyhave the Java Runtime Engine installed. If necessary, the Java Runtime Engine
can be downloaded from www.java.com. Note that 32-bit operating systems
require the 32-bit Java Runtime Engine, while 64-bit operating systems require the64-bit Java Runtime Engine.

1.8 Description of the Quantus LP100
1.8.1 Introduction
The INFICON Quantus LP100 gas analysis system is designed for monitoringchanges in gas composition over the pressure range of 10 mTorr to 1 Torr, including
many corrosive gas environments. In some cases, the LP100 may function beyond
this pressure range. However, the ability to ignite plasma may be affected by the
species of gas present. Therefore, the pressure range for plasma ignition, or forsustaining the plasma, may be greater or lesser depending on the application. For
application specific support, please contact your nearest INFICON representative.

1-5

Quantus LP100 Operating Manual

1.8.2 LP100 Sensor Overview
The LP100 (Figure 1-1) is designed for applications that operate between 0.01 and1 Torr. Exact pressure range is application dependent. Range of 0.01 to 1 Torr istested with argon. The LP100 is designed and manufactured to withstand exposure
to corrosive and aggressive gases such as Chlorine, Fluorine and other chemicals.
The LP100 has two main sections, an Electronic Control Module (ECM) and a
Microplasma Sensor Cell (MSC). The ECM occupies the larger portion of the
housing while the MSC occupies the smaller portion of the housing.

IPN 074-510-P1B

Figure 1-1 LP100

1-6

Quantus LP100 Operating Manual

1.8.3 LP100 Microplasma Sensor Cell

IPN 074-510-P1B

Figure 1-2 LP100 Microplasma Sensor Cell

The Quantus LP100 creates a plasma by coupling energy into the gas utilizing apatented planar antenna in the Microplasma Sensor Cell. The antenna is protectedby a sapphire window so it is not exposed to the process chamber or gas sample.
This provides the LP100 its unique operating capabilies that allow the sensor tooperate in corrosive and aggressive environments. The planar antenna is built
using PCB techniques that provide tight tolerances and high performance. The
Microplasma Sensor Cell can be replaced in the field.

1.8.4 LP100 Electronic Control Module
The Electronic Control Module includes an optical spectrometer and control
electronics. It is powered by a 24 V (dc) power supply, has a cooling fan and six
status LEDs. Primary communication is through a USB port. Auxiliary I/O isavailable through a 15-pin D-sub connector.

1-7Quantus LP100 Operating Manual

1.9 AUX I/O Connector
1.9.1 Auxiliary I/O Specifications
1.9.1.1 Mechanical15-pin D-sub male connector used on Electronic Control Module. 15-pin D-sub
female mating connector required.
1.9.1.2 Electrical
1.9.1.2.1 Digital I/O
Signals I/O 0 to I/O 3 can be set or read by the Quantus. These four (input or
output) bi-directional auto-sensing level shifters are TTL-compatible I/O
connections rated for 0 to 5V (dc) with 10 k-ohm pull-up impedance. As digital
output connections, each can source a maximum of 0.5 mA. As digital input
connections, each can sink a maximum of 1.0 mA. The user is responsible forlimiting the input current to the 1.0 mA maximum.
1.9.1.2.2 Relay
A contact closure relay, single-pole double-throw (SPDT) is included in the
Quantus Electronic Control Module. Maximum current is 0.5 A, maximum voltage
is 50 V (ac). The relay is controlled by FabGuard software. The normal (inactive)
state is electrical continuity between pins 1 and 3, pin 2 open. The active stateswitches to continuity between pins 2 and 3, pin 1 open.
1.9.1.2.3 Valve Driver

1.9.2 Auxiliary I/O Pin Designations
Table 1-2 AUX I/O Pin Designations

AUX I/O 15-pin D-sub Connector

1-8

Pin #

Signal1

Relay NC

2

Relay NO

3

Relay Common

4

I/O 2

5

I/O 1

6

I/O 0

7

Valve Control Return

IPN 074-510-P1B

24 V Valve Driver, powered by the Quantus Electronic Control Module andcontrolled by FabGuard software. Valve is open when circuit is active, which iswhen pin 7 is grounded by the Quantus Electronic Control Module.

Quantus LP100 Operating Manual
Table 1-2 AUX I/O Pin Designations (continued)

AUX I/O 15-pin D-sub Connector
Pin #Signal8

Valve + 24 VDC

9

I/O 3

10

No Connection

11

No Connection

12

GND

13

GND

14

GND

15

GND

1.10 Quantus LP100 Specifications
Table 1-3 details the specifications for the Quantus LP100 gas analysis system. As
a result of the continuous product improvement and quality assurance programs inplace at INFICON, these specifications are subject to change without notice orobligation.
NOTE: All specifications are measured after a 1 hour warm-up period.
Table 1-3 Quantus LP100 Specifications

Parameters

LP100

Performance

IPN 074-510-P1B

Technology

Spectrometer Performance

Optical Emission Spectroscopy using proprietary
and integrated ICP microplasma, spectrometerand RF power supply
200 to 850 nm wavelengths (UV-Vis)
16-bit full-scale resolution, 2048 pixels

Integration Time

Minimum of 1ms

Detection Limit

To low PPM levels(Application dependent)

Gas Sampling Interface
Process Environment 1

0.01 to 1 Torr
(Application dependent)

Vacuum Fitting

KF25

Maximum Flange Temp

80°C

1-9

Quantus LP100 Operating Manual
Table 1-3 Quantus LP100 Specifications (continued)

Parameters

LP100

Serviceability

Sensor Cell is field replaceable

Facilities
Operating Temp Range

0-50°C (non-condensing, Sensor Cell 80°C)

Power Requirements

24 V (dc) @ 2.5 A (AC/DC converter provided)

Power Consumption< 25 Watts (typical, steady-state operation)

Carrier Gases
Mounting Options

None required
Direct Mount via KF25 Flange

Approximate Dimensions and Weight
Dimensions

3.4" H x 5.9" W x 9.5" L(87 mm x 15 1mm x 241 mm)

Weight5.9 lbs. (2.7 kg)

IPN 074-510-P1B

1 Pressure range for argon. Pressure range may differ per application.

1 - 10Quantus LP100 Operating Manual

Chapter 2
Theory2.1 Introduction to Optical Emission Spectroscopy
The INFICON Quantus gas analysis system utilizes optical emission spectroscopy
to monitor gases present in a chamber, delivery line or pump line. This chapter will
discuss the theory behind optical emission spectroscopy and then briefly discuss
how Quantus utilizes these phenomena for detecting leaks, contaminants, processchanges, or process endpoints.

2.2 Origin of Optical Emission Theory

IPN 074-510-P1B

In the early 1900s, Neils Bohr redefined atomic physics with the Bohr model of theatom. His theory stated that atoms had discrete, quantized energy levels where
electrons can exist. He also noted that the electrons can excite to higher energy
levels if they absorb an energy equivalent to the difference in energy between the
two levels. The electron then can exist inside of the "excited" energy level but will
eventually relax to the unexcited state. When the electron drops from the excitedenergy level to the unexcited level, the energy that was absorbed for the excitationmust be released. This energy is released in the form of a single photon that hasenergy equivalent to the difference between the excited and unexcited energy
states. A visual depiction of the different quantum energy levels can be seen in
Figure 2-1 on page 2-2.
As indicated in Figure 2-1, there are three basic series that are defined for theHydrogen atom: the Lyman Series, the Balmer Series and the Paschen Series. The
Lyman Series includes all of the photons generated when electrons go from an
excited state back to the most unexcited state, n=1. The photons generated in the
Lyman Series are 94 nm, 95 nm, 97 nm, 103 nm and 122 nm which are all in the
UV range of the electromagnetic spectrum. The Balmer Series is the more easily
measured series and includes all of the photons generated when electrons go froman excited state down to a less excited state, n=2. The photons generated in theBalmer Series are 410 nm, 434 nm, 486 nm and 656 nm which are all in the visible
range. A visual representation of the Balmer Series is presented in Figure 2-2 onpage 2-2. The third series, the Paschen Series, includes all of the photons
generated from relaxation from an excited energy state to the n=3 energy state.
This produces photons with wavelengths of 1084 nm, 1282 nm and 1875 nm which
are all in the IR range of the electromagnetic spectrum.

2-1

Quantus LP100 Operating Manual
Figure 2-1 Hydrogen Energy Levels

Paschem SeriesBalmer Series
Lyman Series

The energy of the photon emitted by the gas can be determined by the following
equations:E = h

[1]

 = --c

[2]

E = hc-----

[3]

Where E = energy,  = frequency, c = the speed of light (3.00E8 m/s),
 = wavelength and h = Planck’s constant (6.626E-34 Js).

2-2

IPN 074-510-P1B

Figure 2-2 Balmer Series

Quantus LP100 Operating Manual

Since the energy is quantized, only a single wavelength of light is emitted for eachrelaxation. This produces a line in the optical spectrum. Since each element ormolecule has a specific set of energy levels, each element or molecule has aunique line spectrum. Also, because each element or molecule produces photons
independently, the number of photons of a certain wavelength is related to theconcentration of a specific element or molecule.

2.3 Complex Optical Emission Spectra
Thus far, the only optical emission spectra discussed has been that of monatomic
Hydrogen. Monatomic Hydrogen, of course, has a very simple atomic structure
including only one electron. As elements increase in complexity or combine withother elements to form molecules, more electrons are given the opportunity to exist
in more energy states producing complex spectra. This section will discuss the twodifferent reasons for complex spectra.

2.3.1 Increasing Numbers of Electrons
Multi-electron systems baffled Neils Bohr during his lifetime, and unfortunately,such is still the case today. Due to this, the underlying physics, mathematics andchemistry that define emission spectra of multi-electron elements include amultitude of assumptions and estimations. However, that is on the theoretical sideof science. For our needs, only one rule is important: as elemental complexity
increases, so does the complexity of an element’s emission spectrum or as theatomic number increases, so does the complexity of the atomic emission spectrum.
This can be seen in Figure 2-3 which shows emission spectra of both Oxygen and
Argon. When you compare these spectra to the Hydrogen spectrum seen in Figure
2-2, it’s easy to see how the complexity increases.

IPN 074-510-P1B

Figure 2-3 Comparison of Elemental Emission Spectra

OxygenArgon

Remember that each electron can exist in each energy state. Because theelectrons have different energy based on spin and ground state configuration, amultitude of different energy photons are released when the electrons relax to a
non-excited state.

2-3Quantus LP100 Operating Manual

The other thing to note is that many of these different atomic emission lines havevery similar wavelengths (i.e., Oxygen has lines at 394.729 nm, 394.748 nm and394.759 nm). Depending on the resolution of an instrument, these could appear as
three distinct lines or just as one line at 394.7 nm with the intensity of all three lines
added together.
Another thing to note is that although each spectrum is unique for a given atom,that does not mean that two elements cannot have overlapping lines. For instance,
Argon has lines at 394.6097 nm and 394.8979 nm. Again, depending on the
instrument, an Argon/Oxygen mix could show 5 distinct lines at 394.6097 nm,
394.729 nm, 394.748 nm, 394.759 nm and 394.8979 nm or it could show one line
at 395 nm that includes the intensity of all 5 lines.

2.3.2 Molecular Combinations of Atoms
When atoms combine to form molecules, their orbitals combine to form new
bonding orbitals. These bonding orbitals create more energy states that electrons
can exist in. Since there are more energy states, there are more chances forelectrons to excite and relax and then release photons. This can create very
complex optical emission spectra. The discussion of the theory is outside of thescope of this manual, but it’s worth noting that molecules have more complex
spectra than elements.

Due to each element or molecule producing their own unique spectra and theamount of photons being related to the concentration of a specific element ormolecule, Optical Emission Spectroscopy can be used to detect changes in therelative concentration of gases present in a chamber, gas line, or process. In order
to utilize Optical Emission Spectroscopy, the electrons in the gas have to be excited
to higher energy states. This is accomplished by the proprietary Microplasma Cellof the Quantus sensor. Inside the Microplasma Cell, the gas molecules areenergized to excite the electrons to higher energy levels. When the electrons relax,
photons of light are emitted as described above. These photons are then divided
according to their wavelength and detected by a CCD in the LP100 system. This
allows INFICON FabGuard analysis software to monitor, as a function of time, theintensity versus wavelength optical emission specta generated in the Microplasma
Sensor Cell. Analysis of the optical spectra versus time provides for the detectionof leaks, contaminants, process changes, or process endpoints. Note thatquantitative determination of concentration is not generally possible because theintensity of different wavelengths in the optical emission spectrum depends on theconcentration and energy distribution of electrons in the plasma as well as theconcentration of the species of interest.

2-4

IPN 074-510-P1B

2.4 Quantus and Optical Emission Spectroscopy

Quantus LP100 Operating Manual

Chapter 3
Installation
3.1 Installation of the Quantus LP100
The LP100 installs quickly and easily. Listed below are the typical steps required to
install the sensor. Please note that your installation requirements may differ.

3.1.1 LP100 Installation Requirements
Power . . . . . . . . . . . . . . . . . . . . . . . . 24 V (dc) @ 2.5 A
Includes 100-240 V (ac) to 24 V (dc)converter with connector, 50/60 Hz
compatible.
Connector pin designations:
Table 3-1 Connector Pin Designations

Pin #Connection

1+24 V (dc)2

+24 V (dc)3Ground4

GroundIPN 074-510-P1B

Vacuum Chamber Interface . . . . . . . KF-25 flange and clamp (provided)
Communications. . . . . . . . . . . . . . . . 5 m USB A - B cable (provided), Ethernet to
USB converter (optional)
Approximate Weight . . . . . . . . . . . . . 5.9 lbs. (1.8 kg)Computer Interface. . . . . . . . . . . . . . A Microsoft Windows XP or higher PC witheither a USB A, or an RJ-45 Ethernet,
interface is required to use FabGuard.
Auxiliary I/O . . . . . . . . . . . . . . . . . . . 15-pin D-sub interface
3.1.1.1 LP100 Dimensions
3.4" H x 5.9" W x 9.5" L (87 mm x 151 mm x 241 mm)

3-1

Quantus LP100 Operating Manual

3.1.2 Installation Comments
WARNINGThe gas sensors utilize radio-frequency power supplies,
high-voltage power supplies, and in their intended use
may generate light emission from the ultra-violet to theinfrared. High-voltage, radio-frequency, and ultra-violet
exposure may be hazardous. It is the responsibility of theuser to only operate the sensor when it is installed
appropriately.

Ensures that the environment is appropriate for operation of the sensors. The
LP100 sensor internal materials are stainless steel, viton and sapphire. The
user should evaluate if any chemicals, gases, or their byproducts, to which thesensor will be exposed present the potential for attack of these materials and if
such attack would present a safety hazard. Should such a hazard exist the user
should ensure that appropriate safety monitoring capabilities are installed at theprocess tool and/or facility level (e.g., facility toxic or hazardous gas
monitoring).

Ensures that users cannot physically access the internal portions of the sensor
in which the microplasma operates. Typically the sensor is installed on avacuum system whose containment vessel prevents access.

Ensures that the user cannot directly view the microplasma as UV emission
may be present.



Is protected from exposure of the interior of the microplasma sensor cell toother sources of light, including ambient light or light generated elsewhere in
the process equipment. Any other light sources seen by the Quantus
spectrometer will make data analysis difficult or impossible.

WARNING
Power SHOULD NOT be connected to the sensor unlessthe above conditions are met. It is the responsibility of
the user to ensure through training of personnel and/or
provision of interlocks or controls on the power supply
that these conditions are met. There are no operating,calibrating, test or other procedures which require
personnel to operate the sensor when these conditions
are not met.

3-2

IPN 074-510-P1B

An appropriate installation meets the following criteria:

Quantus LP100 Operating Manual

The LP100 requires a Class 1, Limited Power Supply DC power supply of 24 V (dc),
2.5 A minimum rating. INFICON offers a 100-240 V (ac) to 24 V (dc) power
converter which meets all power supply requirements. Should the user supply
power independently, the user must ensure that the supply has at least theminimum capability and is short-circuit and over-current protected. At a minimum,
the supply should be compliant with UL/CSA 60950-1.
LP100 sensors are intended to be used in clean, protected environments and are
not to be used in outdoor installations or inside installation where significant
amounts of dust, oil, or other vapors are present, unless a separate provision ismade to provide a suitable environmental enclosure. The sensors are intended to
be used in cleanroom environments.

WARNING
There are no user serviceable parts in either the ECM or
MSC and the user should not attempt to open,
disassemble or tamper with these components. Doing so
will void the warranty and may either (1) render the
product non-compliant with safety certifications and/or(2) expose the user to hazardous voltages or emissions.

3.1.3 Cleaning

IPN 074-510-P1B

Should cleaning be required, clean the enclosure exterior with mild detergents or
alcohol applied with a towel or cloth. Cleaning of the interior portions of the
microplasma sensor cell cannot be performed and the user should instead install a
new MSC assembly.

3.1.4 Connecting the USB Interface
USB communications between the Controller and LP100 are established using the
5 m USB cable provided with the system. The total USB cable distance can beincreased by adding one, or more, of the 5 m USB extender cable 962-024-G1.

3-3

Quantus LP100 Operating Manual

3.2 LP100 Installation
Before you start:


CONFIRM that use of a microplasma will not adversely affect the gases,
processes or equipment being monitored.



FOLLOW all safety precautions.



REVIEW the installation process thoroughly before beginning work.

WARNING
DO NOT operate the sensor without its protective
enclosure.

WARNING
DO NOT touch the microplasma within the Microplasma
Source Cell’s cavity.

CAUTION
DO NOT block the fan or vent holes on the Electronic
Control Module.

The Quantus system must be electrically groundedthrough the KF-25 connection flange to the vacuum
chamber or system to which it is installed. Failure toensure proper electrical grounding could result in a
shock hazard and/or personal injury.

3-4

IPN 074-510-P1B

WARNINGQuantus LP100 Operating Manual

Follow the steps shown below to install the Quantus LP100 gas analysis system.

1 Remove KF-25 clamp, protective cap and centering ring from Sensor Cellflange.

2 Attach Sensor Cell flange to mating flange on system using KF-25 centeringring and clamp. The Sensor Cell flange, KF-25 centering ring and clamp areshown in Figure 3-1.
Figure 3-1 LP100 Installation

IPN 074-510-P1B

3 Attach 24 V (dc) power at the PWR connection point shown in Figure 3-2.
4 Attach USB cable at the USB connection point shown in Figure 3-2.
5 The LP100 is electrically grounded through the KF-25 connection flange to thevacuum chamber or system to which it is installed. No other groundconnections are necessary.

3-5Quantus LP100 Operating Manual
Figure 3-2 LP100 Connections
24 V (dc)
Power
Input

24V RF ERR

PWR
24V
25W

5V ON SSAUX I/OUSB

IPN 074-510-P1B

USB
Connection

3-6Quantus LP100 Operating Manual

Chapter 4
Operation
4.1 Introduction
Operation of Quantus is controlled by INFICON FabGuard analysis software. Refer
to FabGuard user documentation and INFICON applications support for more
information regarding sensor setup and operation.
The LP100 is designed to ignite its plasma over a pressure range from 10 mTorr to
1 Torr. However, the ability to ignite plasma can be affected by the species of gas
present. Therefore, the pressure range for plasma ignition, or for sustaining theplasma, may be greater or lesser depending on the application.
Optical spectra acquired by the Quantus are analyzed by FabGuard analysis
software.

4.2 Sensor Status LEDs
As shown in Figure 4-1, the LP100 is equipped with six green LEDs to indicate
sensor status.
Figure 4-1 Sensor Status LEDs
24V RF ERR
5V ON SSIPN 074-510-P1B

4.2.1 Descriptions of Sensor Status LEDs
The Quantus sensor status LEDs are summarized in Table 4-1. When 24 V (dc)
power is applied to the sensor, the 24 V and 5 V LEDs illuminate. During initial
power-up, the other four LEDs flash several times to indicate that the LEDs arefunctioning.
Table 4-1 Summary of Sensor Status LEDs

LED Label

Description

24 V

24 V (dc) Power Present

5V

5 V (dc) Power Present

RF

RF Amplifier Enabled - RF power being delivered to theantenna to start, or sustain, the microplasma.

4-1

Quantus LP100 Operating Manual
Table 4-1 Summary of Sensor Status LEDs (continued)

LED Label

Description

ON

Microplasma On - Light is being detected from themicroplasma.

ERR

Hardware Error

SS

Spread Spectrum (Dithering) - Frequency modulation, as
described in section 4.3, is active.

CAUTION
If no LEDs illuminate after power is applied, then a fault
in the sensor is likely to have occurred. In that casecontact INFICON for assistance.

4.3 Spread-Spectrum (SS)IPN 074-510-P1B

The LED labelled SS in Figure 4-1 indicates, when lit, that the LP100 is operatingin spread spectrum mode, a form of frequency modulation also known as dithering.
Spread spectrum is the default mode of operation for the LP100. In this mode, thesensor modulates the RF drive frequency about the nominal frequency for a given
Microplasma Sensor Cell. While SS is the default mode of operation, it can bedisabled through FabGuard software. With SS disabled, the sensor will operateover a wider pressure range and produce higher signal values. However, with SS
disabled, the LP100 may not operate entirely within conformity of all standards
listed in the Declaration of Conformity.

4-2

Quantus LP100 Operating Manual

Chapter 5
Accessories and Spare Parts
5.1 LP100 Spare Parts
Table 5-1 LP100 Spare Parts

INFICON Part Number

Description

962-601-G1

LP100 - Standard and Corrosive Environment Cell

962-401-G1

Power Supply - 100-240 V (ac) @ 50/60 Hz to 24 V (dc)

5.2 LP100 Accessories
Table 5-2 LP100 Accessories

INFICON Part Number

Description

962-020-G1

Isolation Valve Kit

962-024-G1

USB Extender Cable 5m

962-025-G2

USB to Ethernet Kit

5.2.1 USB to Ethernet Kit

IPN 074-510-P1B

Quantus can be controlled by FabGuard software utilizing an Ethernet connection.
This is accomplished using an Ethernet to USB Adapter 962-025-G2.

5.2.2 Isolation Valve Kit
Isolation Valve Kit 962-020-G1 is available as an accessory for Quantus. This kit
includes an INFICON VAP025-X pneumatic right-angle valve and a control cable
to interface the valve directly to the Quantus Electronic Control Module.

5-1

Quantus LP100 Operating Manual

IPN 074-510-P1B

This page is intentionally blank.

5-2Quantus LP100 Operating Manual

Chapter 6
Maintenance
6.1 Introduction
The Microplasma Sensor Cell (MSC) contains components for igniting andsustaining the microplasma, including a planar antenna. The MSC also contains
two sapphire windows. One window isolates the antenna from the vacuum
chamber, process gases and microplasma. The second window allows light
generated in the microplasma to pass out of the cell to be gathered by the collection
optics for analysis by the Quantus system.
The MSC can be replaced when necessary. In order to replace the MSC, vacuum
must be broken. The frequency of the new MSC, if different from the previous MSC,
must be updated at the Sensor Configuration Screen for this sensor using
FabGuard software. The MSC can be returned to INFICON for refurbishment for
subsequent re-use on either the same LP100 or another LP100.

6.2 Replacing the Microplasma Sensor Cell (MSC)
CAUTION
Keep the inside of the MSC clean. Do not contaminate theinside of the MSC because it will be exposed to theprocess chamber or pump line to which it will beconnected.
Follow the steps shown below to replace the MSC of the Quantus LP100.

IPN 074-510-P1B

1 Remove the LP100 from the chamber or system it is installed upon by removing
the KF-25 clamp and centering ring. See Figure 6-1. Keep the clamp andcentering ring for re-installation of the LP100. Keep the centering ring clean.
Figure 6-1 KF-25 Clamp & Centering Ring

6-1

Quantus LP100 Operating Manual

2 Remove the sensor cover plate by removing the eight screws as shown in
Figure 6-2 and Figure 6-3. Keep the cover plate and screws for re-assembly atthe end of this procedure.
Figure 6-2 LP100 with Cover Plate Installed

IPN 074-510-P1B

Figure 6-3 LP100 with Cover Plate Removed

6-2

Quantus LP100 Operating Manual

3 Remove the outer gasket by gently stretching it around the MSC flange.
See Figure 6-3 and Figure 6-4.
Figure 6-4 Outer Gasket Removed

4 Remove the MSC from the LP100 housing by sliding the MSC forward from thehousing. Do not touch the inside of the MSC. See Figure 6-5.

IPN 074-510-P1B

Figure 6-5 MSC Cell Removed

6-3

Quantus LP100 Operating Manual

5 Remove the inner gasket. Refer to Figure 6-5 and Figure 6-6.
Figure 6-6 Inner Gasket Removed

6 Install new inner gasket from replacement MSC kit. If a new inner gasket is notavailable, then re-use the original inner gasket. To install the inner gasket, place
the LP100 upright on the work surface so the gasket can rest at the bottom of
the cavity as shown in Figure 6-7. Leave the LP100 in this upright position for
the next step, installing the new MSC.

IPN 074-510-P1B

Figure 6-7 Inner Gasket Installed

6-4

Quantus LP100 Operating Manual

7 Carefully install the new MSC by slowly sliding it down into the housing. Be
careful to do this slowly, without too much force, to ensure the connectors are
not damaged and are properly mated. See Figure 6-8.
Figure 6-8 MSC Cell Installed

Frequency
Label

8 Read the cell frequency, in units of MHz, from the label on the new cell. Refer
to Figure 6-8. Note this frequency and update it at the Sensor Configuration
Screen for this sensor using FabGuard software.

9 Install new outer gasket from replacement MSC kit. If a new outer gasket is notavailable, then re-use the original outer gasket. To install gasket, gently stretch
it around the flange of the MSC. See Figure 6-9.

IPN 074-510-P1B

Figure 6-9 Outer Gasket Installed

6-5

Quantus LP100 Operating Manual

10 Install cover plate with eight screws as shown in Figure 6-3 and Figure 6-10.
Figure 6-10 LP100 with Cover Plate Installed

11 Be sure to update the MSC frequency at the Sensor Configuration Screen for

IPN 074-510-P1B

this sensor using FabGuard software. Refer to FabGuard user documentationor contact INFICON applications support for more information regarding sensor
configuration.

6-6