DATA SHEETS Series
The S Series, designed with Merit Sensor’s new proprietary MeritUltra™
technology, is an ideal pressure-sensing solution for applications with low
to medium pressure.
COMPANY: Merit Sensor is a leader in piezoresistive pressure
sensing and partners with clients to create high-performing
solutions for a variety of applications and industries.

MeritUltra™: Merit Sensor’s new proprietary MeritUltra™
technology provides a best-in-class operating temperature
range (-40°C to 150°C) and superior stability.

TECHNOLOGY: Merit Sensor utilizes a piezoresistiveWheatstone bridge in a design that anodically bonds glass toa chemically etched silicon diaphragm. All products are
RoHS and REACH compliant.

CAPABILITIES: Merit Sensor designs, engineers, fabricates,
singulates, assembles, tests, sells, and services die and packaged
products from a state-of-the-art facility near Salt Lake City, Utah.

FEATURES
Range

1 to 5000 psi / 0.07 to 344.7 bar / 6.9 to 34,474 kPa

Type

Absolute or gage

Media

Clean dry air and non-corrosive gases

Shipping

Wafers on tapeFlexibility

Sensitivity, bridge resistance, half-closed andclosed bridge, and bond-pad layout

S Series Part Number Configurator

BENEFITS
Performance Enjoy best-in-class performance due to Merit
Sensor’s new proprietary MeritUltra™ technology.
Cost

Save money over time with high-performing die.

Security

Feel confident doing business with an experienced
company backed by a solid parent company(NASDAQ: MMSI).

Speed

Get to market quickly with creative andflexible solutions.

ServiceExperience prompt, personal, andprofessional support.

S1XX-XXXX-XXTBridge
H = ½ Closed
C = Closed
K = Closed

Constraint
A8 = 0.5 mm AbsoluteB2 = 0.5 mm Gage
N = No glass

Impedance
1 = 5kohm Bridge
2 = 3.5kohm Bridge

μV/V/psi
5333 = 1 psi or 3 psi
4000 = 5 psi
1333 = 15 psi
0667 = 30 psi
0300 = 70 psi
0200 = 100 psi
0067 = 300 psi
0006 = 5000 psi

Example:S1C1-1333-A8T offers
Closed Bridge, 5kohm
Bridge Impedance,
15 psi, and 0.5mm
Absolute constraint

Note:• Maximum sensitivity for C-layout is 4000 μV/V/psi• Only 5kohm impedance is available for C-layout

Sales +1 801.208.4722 · Customer Service +1 801.208.4700 · Fax +1 801.208.4798 · sensors@merit.com · www.MeritSensor.com
1600 W. Merit Parkway · South Jordan, Utah · 84095 · USA

SseriesDS.011

S Series
SPECIFICATIONSParameter

Minimum

TypicalMaximum

Units

Notes

510V

Maximum: 2mA

5000

6000

Ω

@25°C
MeritUltra™ technology

Electrical & Environmental
Excitation (+IN)
Impedance

4000

Operating Temperature

-40

150°C

Storage Temperature

-55

160°C

Performance
Offset-10010mV/V

Zero pressure; gage only; @25°C

Non-linearity-0.2

00.2% FSO

Best-fit straight line; @25°C

Pressure Hysteresis-0.100.1% FSO@25°C

Temp Coeff – Zero-30

030μV/V/°C-40°C to 150°C

Temp Coeff – Resistance

2000

2500

3000

PPM/°C-40°C to 150°C

Temp Coeff – Sensitivity

-1400

-1900

-2400

PPM/°C-40°C to 150°C

Thermal Hysteresis-0.2

00.2% FSO

Zero pressure -40°C to 150°C

Long-Term Stability-0.2

00.2% FSO

-40°C to 150°C

Burst Pressure: Backside

5X

Full-scale pressure; 4x forsensitivity 5333 μV/V/ psi

Burst Pressure: Topside

10X

Full-scale pressure

Full-Scale Output (@ 5 volts excitation)
3 psi (0.2 bar; 20.7 kPa)

60

80

100mV

5 psi (0.34 bar; 34 kPa)

75

100125mV

15 psi (1 bar; 103 kPa)

75

100125mV

30 psi (2 bar; 207 kPa)

75

100

125mV

70 psi (4.8 bar; 483 kPa)

75

100

125mV

100 psi (7bar; 670 kPa)

75

100

125mV

300 psi (21 bar; 2070 kPa)

75

100

125mV

5000 psi (344.7 bar; 34,474 kPa)

120

150

180mV

Typical output at 1 psi = 26.7mV @25°C

Sales +1 801.208.4722 · Customer Service +1 801.208.4700 · Fax +1 801.208.4798 · sensors@merit.com · www.MeritSensor.com
1600 W. Merit Parkway · South Jordan, Utah · 84095 · USA

DIMENSIONS (millimeters, post-cut)
Half-closed Bridge

Closed Bridge (C Layout)

Typ. 1.57 mm
0.615 mmTyp. 1.57 mm

0.615 mm

18270.59mm
0.515 mm0.44 mm0.615 mm0.615 mm0.615 mm0.59 mm0.515 mm

18270.615 mm

0.394 mm0.31 mm0.30 mm0.15 mm633

Typ. 1.57 mm

0.30 mm0.615 mmTyp. 1.57 mm

0.31 mm440.615 mm

50.615 mm

650.615 mm

0.615 mm0.615 mm0.21 mmBond Pad (1-8) Size = 0.15mm x 0.15mm

Closed Bridge (K Layout)
Typ. 1.57 mm
0.615 mm0.615 mm1Standard Bond Pad Metallization:
Aluminum

71.57 mm

0.5 mmSubstrate Glass Layer
0.615 mm0.615 mm260.60mm
0.515 mm0.44 mm0.615 mm0.515 mm18270.635 mm

0.394 mm0.615 mm3Typ. 1.57 mm

0.31 mm0.615 mm0.615 mm0.31 mm0.30 mm0.15 mm30.31 mm

1.57 mm

0.5 mm

0.615 mm0.635 mm0.31 mm440.615 mm

560.615 mm

Bond Pad (1-8) Size = 0.15mm x 0.15mm

0.635 mm

S2- Series : CLOSED BRIDGEELECTRICAL

2 or 7

SUBSTRATE
45V-IN V-IN

V+IN

V+IN

1 or 8

1 or 7S

5 V-OUT
SS

RE

S
RE

2 or 72 of 6

SUBSTRATE
4S

V+OUT 3RE

SUBSTRATE

54V-IN V-IN

V-IN

RE

S

S

S

4 V-OUT

5 V-OUTRE

S

V+OUT 1 or 8

Closed Bridge (C Layout)
RE

RE

S

S

2 of 6

3 or7SUBSTRATE

SUBSTRATE

45 or 6

V-IN

V-IN

S2 Series : H

Pad1,823,745,6Connection
O+E+SUBOE-

Closed Bridge (K Layout)
RERES

S

RE

S

S

S

RE

REConnection
O+V+OUT 3E+SUB
OE-RE

6 V-OUT

V+OUT 3Pad
31, 82,764, 5SS

1 or 7RE

RE

S

RE

V+IN
2V+IN

Half-closed Bridge

REV+IN
1 or 86 V-OUT

0.615 mm0.885 mm0.615 mm0.615 mmRE

0.31 mm0.615 mm50.5 mm0.885 mmPad
31, 72,654Connection
O+E+
SUB
OE-

Sales +1 801.208.4722 · Customer Service +1 801.208.4700 · Fax +1 801.208.4798 · sensors@merit.com · www.MeritSensor.com
1600 W. Merit Parkway · South Jordan, Utah · 84095 · USA

V+OUT 1 or 8