DATA SHEETRPD Series

The Merit Sensor RPD Series uncompensated packaged sensor is designed forthe application of a wide range of pressures to the backside of the sensing element.
The RPD is a flexible platform with excellent media compatibility. Its small, compact
design is ideally suited for medical and industrial applications.
COMPANY: Merit Sensor designs and fabricates MEMS
piezoresistive pressure sensors at our Utah, USA engineeringand fabrication facility. We focus on the customization oftechnically superior pressure sensors to solve customers’pressure sensing needs for the medical, industrial,automotive and aerospace industries.

TECHNOLOGY: Merit Sensor utilizes a piezoresistive
Wheatstone bridge with a chemically etched silicondiaphragm. All products are RoHS compliant.
Standard RPD

CAPABILITIES: Merit Sensor designs, engineers, fabricates,
dices, assembles and tests all products from a state-of-the-art
facility near Salt Lake City, Utah.
FEATURES• Uncompensated, packaged pressure sensor• Pressure Range: 0 to 500psi (0 to 34.474bar)• Typical average full scale output: 150 mVRPD Series Part Number ConfiguratorRXX-XXXX-XX• Size: 7.6 x 8.9 x 6.6 mm• Temperature Range: -40°C to +85°C• Type: Backside gage
• Media: Air, gases and liquids (to be determined on anapplication-by-application basis with Merit engineering team)• Shipping: Tape and reel
• Customization: Pressure range, pressure port
• Excellent performance in both constant current and constantvoltage applications• Simple pressure source attachment and electrical connection• Designed for a soldered connection to wires, ribbon cable,or flex strip

Impedance
1 = 5kohm
Closed Bridge

Constraint2 = Gage
PSI
0015 = 15 psi
0030 = 30 psi
0100 = 100 psi
0300 = 300 psi
0500 = 500 psi

Port
1 = Gel Tube/
No Gel
2 = Gel Tube/
Gel*
3 = Face SealCap
1 = Square CeramicCap

APPLICATION EXAMPLES* Not Available above 100psi• Medical inflation• Water pressure and flow management• Industrial process control

Sales +1 801.208.4722 · Customer Service +1 801.208.4700 · Fax +1 801.208.4798 · sensors@merit.com · www.MeritSensor.com
1600 W. Merit Parkway · South Jordan, Utah · 84095 · USA

RPDseriesDS.005

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RPD SeriesSPECIFICATIONSParameter
Excitation (In)

TypicalMaximum

Units

Notes

515V

Maximum: 3 mA

5000

6000

Ω

Impedance

4000

Operating Temperature-4085°C

Storage Temperature-55100°C

Sentium® technology

Performance
Offset-10010mV/V

Zero pressure; gage only; @25°C

Non-linearity

-0.2

00.2

% FSO

Best Fit Straight Line; @25°C

Pressure Hysteresis

-0.1

00.1

% FSO

@25°C

Temp Coeff – Zero

-25025μV/V/°C-40°C to 85°C

Temp Coeff – Resistance

2300

28003300

PPM/°C-40°C to 85°C

Temp Coeff – Sensitivity-1500-2200-2500

PPM/°C-40°C to 85°C

Thermal Hysteresis-0.1

00.1% FSO

Zero pressure

Burst Pressure

2X

Room Temperature

Full-Scale Output (@ 5 volts Excitation)
15 psi (1 bar; 103 KPa)

60

7590mV50 psi (3.4 bar; 345 KPa)

100

125150mV

100 psi (6.9 bar; 689 KPa)

120

150

180mV

300 psi (20.7 bar; 2068 KPa) 120

150180mV

500 psi (34.5 bar; 3447 KPa) 140

175210mVDIMENSIONSCap(millimeters)
placement tolerance
measured from the cap centerline
to the substrate centerline
Long axis: 0.6
Short axis: 0.0 R.2.9

R.2.9-Out-Out+In+In-In

3.8-InCenterlineof solder +Out
pads

+Out

ensions:h:

Minimum

Electrical & Environmental

1.3
Centerlineof solderpads

8.9 Pad dimensions:
0.7 W
2.2 L
Pad pitch:
1.3

7.6

Cap placement tolerance
0.5
measured from the cap Adhesive
centerlineFillet
to the substrate centerline
0.6
2.5
Long axis: 0.6
Short axis: 0.0
2.3
1.2

5.0
Square

8.9
1.3
Centerlineof solderpads

PACKAGING AND SHIPPING (millimeters)

Closed bridge only

0.5
Adhesive Fillet
0.6

2.5

2.3

1.2

Gel cup placement
tolerance measured fromthe part centerlineto the5.0 substrate centerline
SquareLong axis: 1.3
Short axis: 0.0

7.6

6.4

Gel cup placement
tolerance measured fromthe part centerlineto thesubstrate centerline
Long axis: 1.3
Short axis: 0.0

6.4
3.7

3.7

Vin +

ELECTRICAL

4.0
2.0

Vout -

Vout +

24.0

Vin 16.0

Sales +1 801.208.4722 · Customer Service +1 801.208.4700 · Fax +1 801.208.4798 · sensors@merit.com · www.MeritSensor.com
1600 W. Merit Parkway · South Jordan, Utah · 84095 · USA