DATA SHEETRSH Series

Merit Sensor’s RSH Series is an uncompensated, packaged pressure sensor
designed for a wide range of pressures. The RSH Series is compatible with harshmedia because of its packaging, which isolates the media to the Kovar or ceramicpressure port and the backside of the MEMS die.
Merit Sensor manufactures all products in Salt Lake City, Utah, USA.

COMPANY: Merit Sensor designs and fabricates MEMS
piezoresistive pressure sensors at our Utah, USA engineeringand fabrication facility. We focus on the customization oftechnically superior pressure sensors to solve customers’pressure sensing needs for the medical, industrial,automotive and aerospace industries.

TECHNOLOGY: Merit Sensor utilizes a piezoresistive
Wheatstone bridge with a chemically etched silicondiaphragm. All products are RoHS compliant.

Ceramic Pressure PortCAPABILITIES: Merit Sensor designs, engineers, fabricates,dices, assembles and tests all products from a state-of-the-art
facility near Salt Lake City, Utah.

FEATURES• Pressure Range: 0 to 500psi (0 to 34.474bar)• Temperature Range: -40°C to +150°C

Kovar Pressure Port• Type: Backside absolute or gage
• Media: Air, gases and liquids (to be determined on an
application-by-application basis with Merit engineering team)• Shipping: Tape and reel
• Excellent performance in both constant current and constantvoltage applications• Simple pressure source attachment and electrical connection• Designed for a soldered connection to wires, ribbon cable,flex strip, or surface mount pcb• Customizations are available upon request

APPLICATION EXAMPLESRSH Series Part Number Configurator
RSHXX-XXXX-XX
Impedance
1 = 5kohm
Closed Bridge
Constraint1 = Absolute
2 = Gage• Medical inflation• Water pressure and flow management• Industrial process control

PSI*
0500 = 500 psi

Port
1 = Kovar
Pressure Port
2 = Ceramic
Pressure PortCap
1 = Square Ceramic 		
Cover with Vent 		
Sticker
2 = Square Ceramic 		
Cover without 		
Vent Sticker*Other pressure ranges available upon request.

Sales +1 801.208.4722 · Customer Service +1 801.208.4700 · Fax +1 801.208.4798 · sales@meritsensor.com · www.MeritSensor.com
1600 W. Merit Parkway · South Jordan, Utah · 84095 · USA

Sales +1 801.208.4722 · Customer Service +1 801.208.4700 · Fax +1 801.208.4798 · sales@meritsensor.com · www.MeritSensor.com
1600 W. Merit Parkway · South Jordan, Utah · 84095 · USA

RSHseriesDS.001

RSH Series

RSH Series

SPECIFICATIONS
TypicalMaximum

UnitsNotes

DIMENSIONS FOR STANDARD PACKAGING OPTIONS

515V

Maximum: 3 mA

5000

6000

Dimensions for reference only.Units in inches.
Engineering drawings (with tolerance) available upon order.

ΩElectrical & Environmental
Impedance

4000

Operating Temperature-40

150°CStorage Temperature-55100°C

Vent sticker placement performed manually.
Vent sticker placement performed manually.
Sticker to cover entirety of vent hole in cap.
Sticker to cover entirety of vent hole in cap.
Offset sticker placement acceptable
Offset sticker placement acceptable

Performance
Offset-10010mV/V

Zero pressure; gage only; @25°C

Non-linearity

-0.2

00.2

% FSO

Best Fit Straight Line; @25°C

Pressure Hysteresis

-0.1

00.1

% FSO

@25°C

Temp Coeff – Zero

-25

025μV/V/°C-40°C to 85°C

Temp Coeff – Resistance

23002800

3300PPM/°C-40°C to 85°C

Temp Coeff – Sensitivity-1500-2200-2500PPM/°C-40°C to 85°C

Thermal Hysteresis-0.200.2% FSO

Zero pressure

Burst Pressure

5X

Burst Pressure (500 psi part)

1500

0.25

0.354

0.039

175210mV

Closed bridge only0.037

CROSS SECTIONMEMS Sensing Element

Solder Pad

0.071
0.037

+E

9HQWVWLFNHUSODFHPHQWSHUIRUPHGPDQXDOO\6WLFNHUWRFRYHUHQWLUHW\RIYHQWKROHLQFDS
9HQWVWLFNHUSODFHPHQWSHUIRUPHGPDQXDOO\
2IIVHWVWLFNHUSODFHPHQWDFFHSWDEOH
6WLFNHUWRFRYHUHQWLUHW\RIYHQWKROHLQFDS
2IIVHWVWLFNHUSODFHPHQWDFFHSWDEOH



7.79.0+E-Out+Out

24.0

-E

16.0

&DSSODFHPHQWWROHUDQFHPHDVXUHGIURPWKHFDS&/ WRWKHVXEVWUDWH&//RQJD[LV
6KRUWD[LV

PACKAGING AND SHIPPING (millimeters)
4.02.0




+O

Pressure

-E

Kovar
Pressure Port-O&DSSODFHPHQWWROHUDQFHPHDVXUHGIURPWKHFDS&/ WRWKHVXEVWUDWH&//RQJD[LV
6KRUWD[LV

0.054

0.071
0.234

Cap placement tolerance measured
Cap placement tolerance measured
from the cap CL toCthe substrate CLfrom the cap CL to the substrate
LLong axis: .039
Long axis: .039
Short axis: 0.0
Short axis: 0.0

ELECTRICAL

0.054

0.218

0.075

0.075

0.109

0.109

0.039

0.218

Full-Scale Output (@ 5 volts Excitation)

0.213

0.213

0.09

0.09

psi500 psi (34.5 bar; 3447 KPa) 140

0.040

0.040

0.25

Full scale pressure

0.094

0.094

0.304

0.3040.25

Excitation (In)0.25

Minimum

0.354

Parameter

0.234

RSH Series

RSH Series

SPECIFICATIONS
TypicalMaximum

UnitsNotes

DIMENSIONS FOR STANDARD PACKAGING OPTIONS

515V

Maximum: 3 mA

5000

6000

Dimensions for reference only.Units in inches.
Engineering drawings (with tolerance) available upon order.

ΩElectrical & Environmental
Impedance

4000

Operating Temperature

-40

150°C

Storage Temperature

-55

100°C

Vent sticker placement performed manually.
Vent sticker placement performed manually.
Sticker to cover entirety of vent hole in cap.
Sticker to cover entirety of vent hole in cap.
Offset sticker placement acceptable
Offset sticker placement acceptable

Performance
Offset-10010mV/V

Zero pressure; gage only; @25°C

Non-linearity-0.2

00.2% FSOBest Fit Straight Line; @25°C

Pressure Hysteresis

-0.1

00.1

% FSO

@25°C

Temp Coeff – Zero

-25025μV/V/°C-40°C to 85°C

Temp Coeff – Resistance

2300

2800

3300

PPM/°C-40°C to 85°C

Temp Coeff – Sensitivity

-1500

-2200

-2500

PPM/°C-40°C to 85°C

Thermal Hysteresis

-0.2

00.2

% FSO

Zero pressure

Burst Pressure

5XBurst Pressure (500 psi part)

1500

0.25

0.354

0.039

175210mV

Closed bridge only

0.037

CROSS SECTIONMEMS Sensing Element

Solder Pad

0.071
0.037

+E

9HQWVWLFNHUSODFHPHQWSHUIRUPHGPDQXDOO\6WLFNHUWRFRYHUHQWLUHW\RIYHQWKROHLQFDS
9HQWVWLFNHUSODFHPHQWSHUIRUPHGPDQXDOO\2IIVHWVWLFNHUSODFHPHQWDFFHSWDEOH
6WLFNHUWRFRYHUHQWLUHW\RIYHQWKROHLQFDS
2IIVHWVWLFNHUSODFHPHQWDFFHSWDEOH





7.7

9.0+E-Out+Out

24.0

-E

16.0

&DSSODFHPHQWWROHUDQFHPHDVXUHGIURPWKHFDS&/ WRWKHVXEVWUDWH&//RQJD[LV
6KRUWD[LV

PACKAGING AND SHIPPING (millimeters)
4.02.0






+O

Pressure

-E

Kovar
Pressure Port-O

&DSSODFHPHQWWROHUDQFHPHDVXUHGIURPWKHFDS&/ WRWKHVXEVWUDWH&//RQJD[LV6KRUWD[LV

0.054

0.071
0.234

Cap placement tolerance measured
Cap placement tolerance measured
from the cap CL toCthe substrate CLfrom the cap CL to the substrate
LLong axis: .039
Long axis: .039
Short axis: 0.0
Short axis: 0.0

ELECTRICAL

0.054

0.218

0.075

0.075

0.109

0.109

0.039

0.218

Full-Scale Output (@ 5 volts Excitation)

0.213

0.213

0.09

0.09

psi

500 psi (34.5 bar; 3447 KPa) 140

0.040

0.040

0.25

Full scale pressure

0.094

0.094

0.304

0.304

0.25

Excitation (In)0.25

Minimum

0.354

Parameter

0.234

DATA SHEETRSH Series

Merit Sensor’s RSH Series is an uncompensated, packaged pressure sensor
designed for a wide range of pressures. The RSH Series is compatible with harshmedia because of its packaging, which isolates the media to the Kovar or ceramicpressure port and the backside of the MEMS die.
Merit Sensor manufactures all products in Salt Lake City, Utah, USA.

COMPANY: Merit Sensor designs and fabricates MEMS
piezoresistive pressure sensors at our Utah, USA engineeringand fabrication facility. We focus on the customization oftechnically superior pressure sensors to solve customers’pressure sensing needs for the medical, industrial,automotive and aerospace industries.

TECHNOLOGY: Merit Sensor utilizes a piezoresistive
Wheatstone bridge with a chemically etched silicondiaphragm. All products are RoHS compliant.

Ceramic Pressure PortCAPABILITIES: Merit Sensor designs, engineers, fabricates,dices, assembles and tests all products from a state-of-the-art
facility near Salt Lake City, Utah.

FEATURES• Pressure Range: 0 to 500psi (0 to 34.474bar)• Temperature Range: -40°C to +150°C

Kovar Pressure Port• Type: Backside absolute or gage
• Media: Air, gases and liquids (to be determined on anapplication-by-application basis with Merit engineering team)• Shipping: Tape and reel
• Excellent performance in both constant current and constantvoltage applications• Simple pressure source attachment and electrical connection• Designed for a soldered connection to wires, ribbon cable,
flex strip, or surface mount pcb• Customizations are available upon request

APPLICATION EXAMPLESRSH Series Part Number Configurator
RSHXX-XXXX-XX
Impedance
1 = 5kohm
Closed BridgeConstraint
1 = Absolute
2 = Gage• Medical inflation• Water pressure and flow management• Industrial process control

PSI*
0500 = 500 psi

Port
1 = Kovar
Pressure Port
2 = Ceramic
Pressure PortCap
1 = Square Ceramic 		
Cover with Vent 		
Sticker
2 = Square Ceramic 		
Cover without 		
Vent Sticker*Other pressure ranges available upon request.

Sales +1 801.208.4722 · Customer Service +1 801.208.4700 · Fax +1 801.208.4798 · sales@meritsensor.com · www.MeritSensor.com
1600 W. Merit Parkway · South Jordan, Utah · 84095 · USA

Sales +1 801.208.4722 · Customer Service +1 801.208.4700 · Fax +1 801.208.4798 · sales@meritsensor.com · www.MeritSensor.com
1600 W. Merit Parkway · South Jordan, Utah · 84095 · USA

RSHseriesDS.001