DATA SHEETRS Series

The Merit Sensor RS Series uncompensated packaged sensor is designed forthe application of a wide range of pressures to the backside of the sensing element.
The RS is a flexible platform with excellent media compatibility.
COMPANY: Merit Sensor designs and fabricates MEMS

Merit Sensor is based in Salt Lake City, Utahpiezoresistive pressure sensors at our Utah, USA engineeringand fabrication facility. We focus on the customization oftechnically superior pressure sensors to solve customers’pressure sensing needs for the medical, industrial,
automotive and aerospace industries.

TECHNOLOGY: Merit Sensor utilizes a piezoresistive
Wheatstone bridge with a chemically etched silicondiaphragm. All products are RoHS compliant.

CAPABILITIES: Merit Sensor designs, engineers, fabricates,
dices, assembles and tests all products from a state-of-the-art
facility near Salt Lake City, Utah.

FEATURES• Uncompensated, packaged pressure sensor• Pressure Range: 0 to 500psi (0 to 34.474bar)• Temperature Range: -40°C to +85°C• Type: Backside gage or backside absolute• Media: Air, gases and liquids (to be determined on an
application-by-application basis with Merit engineering team)• Shipping: Tape and reel
• Customization: Pressure range, pressure port, gage or absolute• Excellent performance in both constant current and constantvoltage applications• Simple pressure source attachment and electrical connection

RS Series Part Number Configurator
RSXX-XXXX-XX-FX
Impedance
1 = 5kohm
Closed Bridge• Designed for a soldered connection to wires, ribbon cable,
flex strip, or surface mount pcb

Constraint
1 = Absolute
2 = Gage

APPLICATION EXAMPLES

PSI
0015 = 15 psi
0100 = 100 psi
0500 = 500 psi• Medical inflation• Water pressure and flow management

Shipping Tray*
F0 = Standard Tray
F1 = Custom Flex 		
pcb
F2 = Custom Flex 		
pcb
Port
2 = Ferrule 2.9mm
3 = Ferrule 6.3mm
Cap
1 = Square Ceramic
Cap*Default shipping method is Tape & Reel. Shipping Tray option is available.

• Industrial process control

Sales +1 801.208.4722 · Customer Service +1 801.208.4700 · Fax +1 801.208.4798 · sales@meritsensor.com · www.MeritSensor.com
1600 W. Merit Parkway · South Jordan, Utah · 84095 · USASales +1 801.208.4722 · Customer Service +1 801.208.4700 · Fax +1 801.208.4798 · sales@meritsensor.com · www.MeritSensor.com
1600 W. Merit Parkway · South Jordan, Utah · 84095 · USA

RSseriesDS.004

RS Series

RS Series

SPECIFICATIONS
Notes

DIMENSIONS FOR STANDARD PACKAGING OPTIONS (in millimeters)

515

V

Maximum: 3 mA

5000

6000

Dimensions for reference only.
Engineering drawings (with tolerance) available upon order.

ΩElectrical & Environmental
Excitation (In)
Impedance

4000

Operating Temperature

-40

85°C

Storage Temperature

-55

100°C

Performance
Offset-10010mV/V

Zero pressure; gage only; @25°C

Non-linearity

-0.2

00.2

% FSO

Best Fit Straight Line; @25°C

Pressure Hysteresis

-0.1

00.1

% FSO

@25°C

Temp Coeff – Zero

-25025μV/V/°C-40°C to 85°C

Temp Coeff – Resistance

2300

2800

3300

PPM/°C-40°C to 85°C

Temp Coeff – Sensitivity

-1500

-2200

-2500

PPM/°C-40°C to 85°C

Thermal Hysteresis

-0.2

00.2

% FSO

Zero pressure

Burst Pressure

2X

2.2
0.9

1.9

1.3

2.2

1.3

1.2

0.9

1.9

2.9

1.2

5.1
Square2.9

1.55.1
Square2.7

Room Temperature

Full-Scale Output (@ 5 volts Excitation)

3.215 psi (1 bar; 103 KPa)

60

7590mV

100 psi (6.9 bar; 689 KPa)

120

150

180mV

500 psi (34.5 bar; 3447 KPa) 140

175210mV+E-O

MEMS Sensing Element

Solder Pad

Solder Pad

3.4

3.2

0.5

3.4

1.5

2.7

0.5

Closed bridge only

ELECTRICAL

CROSS SECTION

2.9

Units

0.7
0Maximum2.9
2.9

Typical

0.7
0Minimum2.9

Parameter-E+O+E

6 X Pre-tinned pads
6 X Pre-tinned pads
Square pads for mechanical
Square pads for mechanicalattachment onlyattachment only+E-O
7.7-E

7.7+O

Ferrule9.0 (2.9mm)-O-EFerrule (6.3mm)

9.0

7.60.9Pressure

4.0
2.0

1.9-Out

2.9+Out

1.5

5.1
Square
2.7

3.2

3.4

0.5

24.0-E

16.0

6 X Pre-tinned pads
+E-O-E

6.3

1.2+E

PACKAGING AND SHIPPING (millimeters)

0.7
0.0

1.3

2.9

2.2

2.9

8.9

0.70

Ferrule2.9+O

Square pads for mechanicalattachment only5.1
Square0.7

3.1

4.9

RS SeriesRS Series

SPECIFICATIONS
Notes

DIMENSIONS FOR STANDARD PACKAGING OPTIONS (in millimeters)

515VMaximum: 3 mA

5000

6000

Dimensions for reference only.
Engineering drawings (with tolerance) available upon order.

ΩElectrical & Environmental
Excitation (In)
Impedance

4000

Operating Temperature

-40

85°C

Storage Temperature

-55

100°C

Performance
Offset-10010mV/V

Zero pressure; gage only; @25°C

Non-linearity

-0.2

00.2

% FSO

Best Fit Straight Line; @25°C

Pressure Hysteresis-0.1

00.1% FSO

@25°C

Temp Coeff – Zero-25025μV/V/°C-40°C to 85°C

Temp Coeff – Resistance

2300

2800

3300

PPM/°C-40°C to 85°C

Temp Coeff – Sensitivity

-1500

-2200

-2500

PPM/°C-40°C to 85°C

Thermal Hysteresis-0.2

00.2% FSO

Zero pressure

Burst Pressure

2X

2.2
0.9

1.9

1.3

2.2

1.3

1.2

0.9

1.9

2.9

1.2

5.1
Square
2.9

1.5

5.1
Square2.7

Room Temperature

Full-Scale Output (@ 5 volts Excitation)

3.2

15 psi (1 bar; 103 KPa)

60

7590mV

100 psi (6.9 bar; 689 KPa)

120

150180mV

500 psi (34.5 bar; 3447 KPa) 140

175210mV+E-O

MEMS Sensing Element

Solder Pad

Solder Pad

3.4

3.2

0.5

3.4

1.5

2.7

0.5

Closed bridge only

ELECTRICAL

CROSS SECTION

2.9Units

0.70

Maximum

2.9
2.9

Typical

0.70

Minimum

2.9

Parameter-E+O+E

6 X Pre-tinned pads
6 X Pre-tinned pads
Square pads for mechanical
Square pads for mechanicalattachment onlyattachment only+E-O
7.7-E

7.7+O

Ferrule9.0 (2.9mm)-O-E

Ferrule (6.3mm)

9.0

7.60.9Pressure

4.0
2.0

1.9-Out2.9+Out

1.5

5.1
Square
2.7

3.2

3.4

0.5

24.0

-E

16.0

6 X Pre-tinned pads
+E-O-E

6.3

1.2+E

PACKAGING AND SHIPPING (millimeters)

0.7
0.0

1.3

2.9

2.2

2.9

8.9

0.7
0

Ferrule2.9+O

Square pads for mechanicalattachment only

5.1
Square

0.7

3.1

4.9

DATA SHEETRS Series

The Merit Sensor RS Series uncompensated packaged sensor is designed forthe application of a wide range of pressures to the backside of the sensing element.
The RS is a flexible platform with excellent media compatibility.
COMPANY: Merit Sensor designs and fabricates MEMS

Merit Sensor is based in Salt Lake City, Utahpiezoresistive pressure sensors at our Utah, USA engineeringand fabrication facility. We focus on the customization oftechnically superior pressure sensors to solve customers’pressure sensing needs for the medical, industrial,
automotive and aerospace industries.

TECHNOLOGY: Merit Sensor utilizes a piezoresistive
Wheatstone bridge with a chemically etched silicondiaphragm. All products are RoHS compliant.

CAPABILITIES: Merit Sensor designs, engineers, fabricates,
dices, assembles and tests all products from a state-of-the-art
facility near Salt Lake City, Utah.

FEATURES• Uncompensated, packaged pressure sensor• Pressure Range: 0 to 500psi (0 to 34.474bar)• Temperature Range: -40°C to +85°C• Type: Backside gage or backside absolute• Media: Air, gases and liquids (to be determined on anapplication-by-application basis with Merit engineering team)• Shipping: Tape and reel
• Customization: Pressure range, pressure port, gage or absolute• Excellent performance in both constant current and constantvoltage applications• Simple pressure source attachment and electrical connection

RS Series Part Number Configurator
RSXX-XXXX-XX-FX
Impedance
1 = 5kohm
Closed Bridge• Designed for a soldered connection to wires, ribbon cable,
flex strip, or surface mount pcb

Constraint
1 = Absolute
2 = Gage

APPLICATION EXAMPLES

PSI
0015 = 15 psi
0100 = 100 psi
0500 = 500 psi• Medical inflation• Water pressure and flow management

Shipping Tray*
F0 = Standard Tray
F1 = Custom Flex 		
pcb
F2 = Custom Flex 		
pcb
Port
2 = Ferrule 2.9mm
3 = Ferrule 6.3mm
Cap
1 = Square Ceramic
Cap*Default shipping method is Tape & Reel. Shipping Tray option is available.

• Industrial process control

Sales +1 801.208.4722 · Customer Service +1 801.208.4700 · Fax +1 801.208.4798 · sales@meritsensor.com · www.MeritSensor.com
1600 W. Merit Parkway · South Jordan, Utah · 84095 · USA

Sales +1 801.208.4722 · Customer Service +1 801.208.4700 · Fax +1 801.208.4798 · sales@meritsensor.com · www.MeritSensor.com
1600 W. Merit Parkway · South Jordan, Utah · 84095 · USA

RSseriesDS.004