PCG55x 大气压至中真空真空计

INFICON 皮拉尼电容膜片式测量仪 (PCG55x) 将 INFICON 皮拉尼技术与陶瓷电容膜片传感器的优点结合在单一产品中。
在 10 mbar 和大气压力之间的测量范围内，电容隔膜技术不受气体类型限制，能够提供高度精确的可靠压力测量值。PCG55x 还拥有各种功能，可针对条件苛刻的应用进行正确的产品配置。

好处n

在 10 mbar 以上压力下不受气体类型限制 – 能够安全排放任何气体混合物n

在大气压力下具有高度的准确性和再现性，能够进行可靠、快速的大气压力检测n灵活的安装方向提供自由的加工设计

n

可配备钨丝 (PCG550)、镍丝 (PCG552) 或全陶瓷涂层 (PCG554) 传感器装置用于高腐蚀性应用nLatest EtherCAT protocol Standard ETG.5003.2080 S (R) V1.3.0n

易于更换的即插即用式传感元件与板载校准数据 - 保证了高度再现性和低拥有成本n可选的输出信号，易于集成n

可选大气开关、显示屏和数字接口n合规和标准：CE、EN、UL、CSA、RoHS

1

PCG55x 大气压至中真空真空计订购信息2

PCG55x 大气压至中真空真空计规格类型

PCG550 Tungsten

PCG552 Nickel

PCG554 ceramiccoated测量范围mbar

5×10⁻⁵ … 1500

5×10⁻⁵ … 1500

5×10⁻⁵ … 1500

测量范围Torr

3.8×10⁻⁵ … 1125

3.8×10⁻⁵ … 1125

3.8×10⁻⁵ … 1125

精度
5×10⁻⁴ … 1×10⁻³ 毫巴 (N₂)

% of reading±50±50±50

1×10⁻³ … 100 毫巴 (N₂)

% of reading±15±15±15

100 … 950 毫巴% of reading±5±5±5950 … 1050 毫巴% of reading±2.5±2.5±2.5

1×10⁻³ … 1100 毫巴 (N₂)

% of reading±2±2±2容许压力bar (absolute)≤5≤5≤5压力，最大bar (absolute)

101010可重复性容许温度运行（环境）°C+10 … +50+10 … +50+10 … +50

贮存°C-20 … +65

-20 … +65

-20 … +65

在法兰处烘烤

°C

≤80

≤80

≤80

在长管法兰处烘烤

°C

≤250

≤250

≤250

电源电压

V (dc)+15 … +30+15 … +30+15 … +30

功耗
无现场总线

W

≤2.5

≤2.5

≤2.5

DeviceNet™

W

≤3

≤3

≤3Profibus

W

≤3

≤3

≤3

EtherCAT

W

≤4.5

≤4.5

≤4.5

输出信号模拟 3PCx-0xx-xxx0 V

0 … +10.23

0 … +10.23

0 … +10.23输出信号模拟 3PCx-0xx-xxx1 V

0 … +8.68

0 … +8.68

0 … +8.68

输出信号模拟 3PCx-0xx-xxx2 V

0 … +5.659

0 … +5.659

0 … +5.659

输出信号模拟 3PCx-0xx-xxx3 V

0 … +9.05

0 … +9.05

0 … +9.05

测量范围 3PCx-0xx-xxx0V+0.61 … +10.23+0.61 … +10.23+0.61 … +10.23

测量范围 3PCx-0xx-xxx1

V+1.2 … +8.68+1.2 … +8.68+1.2 … +8.68

测量范围 3PCx-0xx-xxx2V+0.375 … +5.659+0.375 … +5.659+0.375 … +5.659

测量范围 3PCx-0xx-xxx3V+1.57 … +9.05+1.57 … +9.05+1.57 … +9.05

1.286

1.286

1.286

电压与压强
3PCx-0xx-xxx03

volts per decade

PCG55x 大气压至中真空真空计规格类型

PCG550 Tungsten

PCG552 Nickel

PCG554 ceramiccoated3PCx-0xx-xxx1 / -xxx2 / xxx3

volts per decade

111

负载电阻

kΩ

>10>10>10

设定点数量

222

继电器触点

n.o., potential freen.o., potential freen.o., potential free

5×10⁻⁵ … 1000

5×10⁻⁵ … 1000

5×10⁻⁵ … 1000

% of threshold

101010触点额定固态继电器

V (dc)

≤30

≤30

≤30

触点额定机械继电器

V (dc)≤30≤30≤30触点额定固态继电器

A (dc)

≤0.3

≤0.3

≤0.3

触点额定机械继电器

A (dc)

≤1

≤1

≤1

ms

≤30

≤30

≤30

RS232C

RS232C

RS232C

3PCx-0xx-x0xx

FCC, 8-pin

FCC, 8-pin

FCC, 8-pin

3PCx-0xx-x1xx

D-Sub, 9-pin, male

D-Sub, 9-pin, male

D-Sub, 9-pin, male

3PCx-0xx-x2xx

D-Sub, 15-pin HD,
male

D-Sub, 15-pin HD,
male

D-Sub, 15-pin HD,male设定点继电器设定点继电器范围 (N₂)mbar

设定点继电器滞后设定点继电器设定点继电器设定点继电器转换时间
接口（数字）
电气连接3PCx-0xx-x4xx

D-Sub, 15-pin HD, with D-Sub, 15-pin HD, with D-Sub, 15-pin HD, with
RS485, male
RS485, male
RS485, male电缆长度m (ft.)≤100 (≤330)≤100 (≤330)≤100 (≤330)

RS232C 运行m (ft.)≤30 (≤100)≤30 (≤100)≤30 (≤100)

W, Ni, NiFe, Al₂O₃,SnAg, stainless steel,
glass

Ni, NiFe, Al₂O₃, SnAg,stainless steel, glass

Al₂O₃, stainless steel

暴露于真空的材料

内部容积
DN 16 ISO-KF

cm³

4.7

4.7

4.7

DN 16 ISO-KF 长管

cm³

14.5

14.5

14.5

DN 16 CF-F

cm³8884

PCG55x 大气压至中真空真空计规格类型

PCG550 Tungsten

PCG552 Nickel

PCG554 ceramiccoated

DN 16 CF-R 长管

cm³141414

DN 25 ISO-KF，4 VCR

cm³

5.5

5.5

5.5

8 VCR

cm³

7771/8'' NPT，7/16-20 UNF

cm³

5.2

5.25.2表面贴装 29 毫米/1.15 英寸 cm³

4.9

4.9

4.9

4 VCR 90°

cm³

7.9

7.9

7.9

无现场总线接口g

115 … 130

115 … 130

115 … 130带现场总线接口g

230 … 250

230 … 250

230 … 250

IP 40

IP 40

IP 40

重量保护等级
标准
CE 合规

EN 61000-6-2/-6-3, EN EN 61000-6-2/-6-3, EN EN 61000-6-2/-6-3, EN61010
61010
61010

ETL 认证UL 61010-1, CSA 22.2 UL 61010-1, CSA 22.2 UL 61010-1, CSA 22.2No.61010-1
No.61010-1
No.61010-1

DeviceNet™
协议

DeviceNet™, group 2
slave only

MAC ID

2 switches (address 00 2 switches (address 00 2 switches (address 00- 63) or network- 63) or network- 63) or network
programmableprogrammableprogrammable

数字功能read pressure, select read pressure, select read pressure, selectunits: Torr, mbar, Pa, units: Torr, mbar, Pa, units: Torr, mbar, Pa,
micron, counts;
micron, counts;
micron, counts;monitor gauge status, monitor gauge status, monitor gauge status,
detailed alarm anddetailed alarm anddetailed alarm andwarning information,
warning information,
warning information,safe state allows
safe state allows
safe state allows
definition of behavior in definition of behavior in definition of behavior incase of error
case of error
case of error

技术规格

DeviceNet™ "Vacuum DeviceNet™ "Vacuum DeviceNet™ "Vacuum
Gauge Device Profile" Gauge Device Profile" Gauge Device Profile"设备类型''CG'' for combination
gauge''CG'' for combination
gauge''CG'' for combination
gauge

polling only

polling only

polling only

Micro-Style, 5-pin,male

Micro-Style, 5-pin,
maleMicro-Style, 5-pin,male

I / O 从属传讯
DeviceNet 连接器
DeviceNet™

5PCG55x 大气压至中真空真空计

DeviceNet™, group 2
slave only

DeviceNet™, group 2
slave only

规格类型

PCG550 Tungsten

数据率开关kBaud

PCG552 Nickel

PCG554 ceramiccoated125, 250, 500 or
125, 250, 500 or
125, 250, 500 or
network programmable network programmable network programmable

DeviceNet™
电缆长度 125 kbps

m (ft.)

500 (1650)

500 (1650)

500 (1650)

电缆长度 250 kbps

m (ft.)

250 (825)

250 (825)

250 (825)

电缆长度 500 kbps

m (ft.)

100 (330)

100 (330)

100 (330)

V (dc)+15 … +30

+15 … +30+15 … +30≤3≤3≤3kBaud9.6 / 19.2 / 93.75 /187.5 / 500

9.6 / 19.2 / 93.75 /187.5 / 500

9.6 / 19.2 / 93.75 /187.5 / 500

Mbaud

1.5 / 12

1.5 / 12

1.5 / 12

DeviceNet™
DeviceNet™ 的电源电压
3PI6- / 3PI7- / 3PI8-0xxxxxx
DeviceNet™
功耗 3PI6- / 3PI7- / 3PI80xx-xxxx

W

Profibus DP
波特率Profibus DP
波特率Profibus DP地址

2 switches (address 00 2 switches (address 00 2 switches (address 00- 127) or network- 127) or network- 127) or network
programmableprogrammableprogrammable

数字功能read pressure, select read pressure, select read pressure, selectunits: Torr, mbar, Pa, units: Torr, mbar, Pa, units: Torr, mbar, Pa,
micron, counts ;micron, counts ;micron, counts ;monitor gauge status, monitor gauge status, monitor gauge status,
detailed alarm anddetailed alarm anddetailed alarm andwarning information,
warning information,
warning information,safe state allows
safe state allows
safe state allows
definition of behavior in definition of behavior in definition of behavior incase of error
case of error
case of error

Profibus DP 连接器

D-Sub, 9-pin, female

D-Sub, 9-pin, female

D-Sub, 9-pin, female

9.6 / 19.2 / 38.4 /57.6

9.6 / 19.2 / 38.4 /57.6

9.6 / 19.2 / 38.4 /57.6

RS485C
波特率kBaud

RS485C地址

6

2 switches (address 00 2 switches (address 00 2 switches (address 00- 255)
- 255)- 255)

PCG55x 大气压至中真空真空计规格类型

PCG550 Tungsten

数字功能PCG552 Nickel

PCG554 ceramiccoatedread pressure, select read pressure, select read pressure, selectunits: Torr, mbar, Pa, units: Torr, mbar, Pa, units: Torr, mbar, Pa,
micron, counts ;micron, counts ;micron, counts ;monitor gauge status, monitor gauge status, monitor gauge status,
detailed alarm anddetailed alarm anddetailed alarm andwarning information,
warning information,
warning information,safe state allows
safe state allows
safe state allows
definition of behavior in definition of behavior in definition of behavior incase of error
case of error
case of error

RS485 连接器D-Sub, 15-pin HD,
male

D-Sub, 15-pin HD,
male

D-Sub, 15-pin HD,
male

EtherCAT协议 EtherCAT

protocol specialized for protocol specialized for protocol specialized for
EtherCAT
EtherCAT
EtherCAT通讯标准ETG.5003.1 S (R)ETG.5003.1 S (R)ETG.5003.1 S (R)V1.1.0 Common
V1.1.0 Common
V1.1.0 Common
DeviceDeviceDeviceProfileETG.5003.2080 ProfileETG.5003.2080 ProfileETG.5003.2080
S (R) V1.3.0 Specific
S (R) V1.3.0 Specific
S (R) V1.3.0 Specific
Device Profile:
Device Profile:
Device Profile:
Vacuum Gauge
Vacuum Gauge
Vacuum Gauge

节点地址

Explicit Device
Identification

Explicit Device
Identification

Explicit Device
Identification

物理层

100BASE-Tx (IEEE802.3)

100BASE-Tx (IEEE802.3)

100BASE-Tx (IEEE802.3)

EtherCAT 连接器

2 x RJ45, 8-pin(socket), IN and OUT

2 x RJ45, 8-pin(socket), IN and OUT

2 x RJ45, 8-pin(socket), IN and OUT

电缆shielded Ethernet
CAT5e or higher

shielded Ethernet
CAT5e or higher

shielded Ethernet
CAT5e or higher

过程数据

Fixed PDO mapping
Fixed PDO mapping
Fixed PDO mappingand configurable PDO and configurable PDO and configurable PDO
mappingmappingmapping邮箱 (CoE)

SDO requests,
responses andinformation

SDO requests,
responses andinformation

SDO requests,
responses andinformation≤100 (330)≤100 (330)≤100 (330)

EtherCAT
电缆长度7m (ft.)

PCG55x 大气压至中真空真空计备件
PCG550 Tungsten

PCG552 Nickel

PCG554 ceramiccoatedPCG550备用传感器

357-925--

PCG552备用传感器-357-936-

PCG554备用传感器--

357-947

PCG550 Tungsten

PCG552 Nickel

PCG554 ceramiccoatedDiagnostic cable 1.9m (P3)

303-333

303-333

303-333

卡箍 DN 10-16 ISO-KF

211-001

211-001

211-001细目过滤中心环组件DN 16 ISO-KF

211-097

211-097

211-097

附件

8

PCG55x 大气压至中真空真空计尺寸

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