DATA SHEETL Series
The L Series is a silicon MEMS piezoresistive pressure sensor. It is ideal for
ultra-low-pressure applications
COMPANY: Merit Sensor is a leader in piezoresistive
pressure sensing. We partner with clients to create highperforming solutions for a variety of applications and industries.

SENTIUM: Merit Sensor products incorporate a proprietary
Sentium® technology, developed to provide a best-in-classoperating temperature range (-40°C to 150°C) and superior stability.

TECHNOLOGY: Merit Sensor utilizes a piezoresistive
Wheatstone bridge in a design that anodically bonds glass
to a chemically etched silicon diaphragm. All products
are RoHS compliant.

CAPABILITIES: Merit Sensor designs, engineers,fabricates, dices, assembles, and tests products from astate-of-the-art facility near Salt Lake City, Utah.

FEATURES
PressureRange

0.15 to 1 psi (1 to 6.89 kPa 10 to 68.95 mbar)

Size

3.3 mm x 3.3 mm

L Series Part Number Configurator
LXX-XXX-RT

Temperature Wide operating temperature range (up to 150°C)
TypeGage and differential

MediaClean, dry air and non-corrosive gases

ShippingWafers on tape, waffle packFlexibility

Sensitivity, resistance, bridge, etc.

Impedance
1 = 5kohm Bridge
BridgeO = Open
C = Closed

Constraint
R = GageT = sawn wafer
on tape inmetal frame

Sensitivity
10k = 10,000 µV/V/psi = 1psi
30k = 30,000 µV/V/psi = 0.3psi
50k = 50,000 µV/V/psi = 0.15psi

BENEFITS
Performance Enjoy best-in-class performance due to Merit’s
proprietary Sentium technology
Cost

Save money over time with high-performing die

Security

Feel confident doing business with an experienced
company backed by a solid parent company(NASDAQ: MMSI)

Speed

Get to market quickly with creative andflexible solutions

ServiceExperience prompt, personal, andprofessional support

Example: L1O-50K-RT offers 5kohm Impedance,
Open Bridge, 50,000 µV/V/psi and Gage Constraint

L Series Standard Part Numbers
L1O-10K-RT
L1O-30K-RT
L1O-50K-RT

L1C-10K-RT
L1C-30K-RT
L1C-50K-RT

U.S. Patent Number 7,290,453

Sales +1 801.208.4722 · Customer Service +1 801.208.4700 · Fax +1 801.208.4798 · sensors@merit.com · www.MeritSensor.com
1600 W. Merit Parkway · South Jordan, Utah · 84095 · USA

LseriesDS.008

L Series
SPECIFICATIONSParameter

Minimum

TypicalMaximum

Units

Notes

515V

Maximum: 3 mA

5000

6000

Ω

Electrical & Environmental
Excitation (In)
Impedance

4000

Operating Temperature

-40

150°C

Storage Temperature

-55

160°C

Sentium® technology

Performance
Offset-10010mV/V

Zero Pressure; gage only; @25°C

Non-linearity

-0.25

00.25

% FSO

Best Fit Straight Line; @25°C

Pressure Hysteresis

-0.1

00.1

% FSO

@25°C

Temp Coeff – Zero

-20

020μV/V/°C-25°C to 75°C

Temp Coeff – Resistance

20002500

3000

PPM/°C-25°C to 75°C

Temp Coeff – Sensitivity

-2500

-3000

-3500

PPM/°C-25°C to 75°C

Temp Coeff – Sensitivity

-2000

-2500

-3000

PPM/°C-25°C to 75°C

Long-Term Stability-0.25

00.25% FSO@125°C

Proof Pressure

5X

Burst Pressure

10psi(0.15psi)(0.2psi – 1psi)

Full scale pressure

Full-Scale Output (@ 5 volts excitation)
1 psi (69 mbar; 6.9 kPa)

405060mV

0.3 psi (21 mbar; 2.1 kPa)

364554mV

0.15 psi (10 mbar; 1 kPa)30

37.560mV

Additional outputs available
on request

DIMENSIONS (millimeters, post-cut)

ELECTRICAL
Closed Bridge

Open Bridge
3.28 mm

16V+OUT

51.04 mm

1.46 mm

1.37 mm

4V-IN

1.46 mm

1.37 mm

5V+IN

V+IN 1.29 mm V-OUT

V-OUT

Half Bridge
V-IN

V+IN

V+OUT

V+IN1.25 mm

66
3.3

40.12 mm

1.27 mmM
V+OUT 1V+IN

V-IN

V 5Bond Pad Size = 0.15 x 0.2 mm

V-OUT-OUT

V-IN

264V-IN V-IN

V+IN

V+OUT

V+IN

Bond Pad Size
= 0.2 x .015 mm

V+IN V+IN V+IN

74Closed

Bond Pad Size (1-5 and 7) = 0.15 x 0.15 mm
Bond Pad Size (6) = 0.15 x 0.2 mm

1.04 mm

6Closed Bridge
1.00 mm

4V-IN

M

3.28 mm

Open Bridge

3.3V-OUT

3.28 mm

1.37 mm

V-OUT

1.49 mm

M
3V+IN

53

1.05 mm
2V-IN

32

13V+IN V+IN

1.46 mm

1.46 mm

21Open3.28 mm

76PStandard Bond Pad Metallization = Aluminum

V+OUT 35V-OUT

P
1.28 mm
0.9 mm2.58 mm1.22 mm

Note: Bridge output bond pad(V-out and V+out) correspond totop side pressure. For back sidepressure, the bridge outputs
are reversed.

1662V-IN

V-IN

2.2 mmOther constraints
available

Sales +1 801.208.4722 · Customer Service +1 801.208.4700 · Fax +1 801.208.4798 · sensors@merit.com · www.MeritSensor.com
1600 W. Merit Parkway · South Jordan, Utah · 84095 · USA