DATA SHEETHM Series
The HM Series is ideal for high-volume, low and medium pressure,harsh-media applications.
COMPANY: Merit Sensor is a leader in piezoresistive
pressure sensing and partners with clients to create highperforming solutions for a variety of applications and industries.

SENTIUM: Merit Sensor products incorporate a proprietary
Sentium® technology, developed to provide a best-in-classoperating temperature range (-40°C to 150°C) and superior stability.

TECHNOLOGY: Merit Sensor utilizes a piezoresistive
Wheatstone bridge in a design that anodically bonds glassto a chemically etched silicon diaphragm. All products
are RoHS compliant.

CAPABILITIES: Merit Sensor designs, engineers, fabricates,
dices, assembles, and tests products from a state-of-the-art
facility near Salt Lake City, Utah.

FEATURES
Range

15 to 500 psi (1 to 34.5 bar; 103
to 3,447 KPa)

Type

Absolute; pressurized from cavity sideGage; pressurized from either side of thediaphragmMediaAir, gases and liquids that are compatible
with silicon and glass

Shipping

Wafers on tape, waffle packFlexibility

Sensitivity, resistance, bridge, constraint, etc.

BENEFITS
Performance Enjoy best-in-class performance due to Merit’s
proprietary Sentium technology
Cost

Save money over time with high-performing die

Security

Feel confident doing business with an experienced
company backed by a solid parent company(NASDAQ: MMSI)

Speed

Get to market quickly with creative andflexible solutions

ServiceExperience prompt, personal, andprofessional support

HM Series Part Number Configurator
HXX-XXXX-L2X
Impedance
1 = 5kohm
Bridge2 = 3.5kohm
BridgeBridgeC = Closed
T = Closed withtemp diode*

Example:H1T-0300-L2MT
offers 5kohm Impedance,Closed bridge with temp
diode, 300 μV/V/psi
sensitivity, absolute,with Au backmetal

Packing
T = Sawn wafer
on tape inmetal frame
W=Die inwaffle pack
Backglass finish
M = Au backmetal*

Constraint
L2 = Absolute
NL2 = Gage
Sensitivity μV/V/psi
1000 = 15 psi
0700 = 50 psi
0300 = 100 psi
0090 = 300 psi
0070 = 500 psi* Optional

Sales +1 801.208.4722 · Customer Service +1 801.208.4700 · Fax +1 801.208.4798 · sensors@merit.com · www.MeritSensor.com
1600 W. Merit Parkway · South Jordan, Utah · 84095 · USA
HMseriesDS.010

HM Series
SPECIFICATIONSParameter

Minimum

TypicalMaximum

Units

Notes

515V

Maximum: 3 mA

50006000Ω

Optional: 3,500 +/- 500
Sentium® technology

Electrical & Environmental
Excitation (In)
Impedance

4000

Operating Temperature

-40

150°C

Storage Temperature

-55

160°C

Performance
Offset-10010mV/V

Zero pressure; gage only; @25°C

Non-linearity

-0.2

00.2

% FSO

Best Fit Straight Line; @25°C

Pressure Hysteresis

-0.1

00.1

% FSO

@25°C

Temp Coeff – Zero-25025μV/V/°C-40°C to 150°C

Temp Coeff – Resistance

2300

2800

3300

PPM/°C-40°C to 150°C

Temp Coeff – Sensitivity

-1500

-2200

-2500

PPM/°C-40°C to 150°CUdiode @ Is = 40uA

350

530

800mV

Room Temp

TC of Udiode-4.0-1.0mV/°C-40 to 150C

Long-Term Stability-0.200.2% FSO

Long-Term Stability(15psi only)-0.400.4% FSO

Burst Pressure

5X

Burst Pressure (500 psi part)

1500 1.00.5

Full scale pressurepsi

Full-Scale Output (@ 5 volts excitation)
15 psi (1 bar; 103 KPa)
40 psi (2.8 bar; 275.8 KPa)

1.060

7590mV

104

130156mV

150180mV

135160mV

175210mV

100 psi (6.9 bar; 689.5 KPa) 120
0.51

300 psi (20.7 bar; 2,068 KPa) 110
500
psi (34.5 bar; 3,447 KPa) 140
0.38

Glass
SiliconDIMENSIONS(millimeters, postGlasscut)
0.51

Other outputs available
upon request

ELECTRICAL
V+IN

Top View

Bottom View

Optional

TEMP

2.08

0.5

0.5

0.71

V-OUT

2.08
0.89+IN

Temp

Side View

-O

0.36

-IN+O

V+OUT

1.0

1.00.151.0

1.00.25

V-IN

0.51

0.51
Glass

Glass

0.380.38Silicon

Silicon

0.51

0.51
Glass

Glass

Au backmetal (optional)

2.08

P

Sales +1 801.208.4722 · Customer Service +1 801.208.4700 · Fax +1 801.208.4798 · sensors@merit.com · www.MeritSensor.com
2.08

1600 W. Merit Parkway · South Jordan, Utah · 84095 · USA