ARYNI
LIMPREDATA SHEETCMS Series

The CMS Series is a fully compensated, digital I2C and SPI, highly compact
pressure-sensor package designed to offer a long term stable high accuracypressure response.
The CMS Series is a piezoresistive pressure sensor using an ASIC to calibrate and compensate thermal and non-linearity
effects. The compact size, excellent burst pressure, wide operation voltage range and low power mode make it very versatile allowing the design of small and low power devices. This device can be used at a wide pressure range, absoluteand gage options are available.
COMPANY: Merit Sensor is a leader in piezoresistive pressure sensing andpartners with clients to create high performing solutions for a variety ofapplications and industries.
SENTIUM: Merit Sensor products incorporate a proprietary Sentium®
technology developed to provide a best-in-class operating temperature
range and superior stability.
TECHNOLOGY: Merit Sensor utilizes a piezoresistive Wheatstone bridgein a design that anodically bonds glass to a chemically etched silicondiaphragm. All products are RoHS compliant.
CAPABILITIES: Merit Sensor designs, engineers, fabricates, dices,assembles, tests, sells and services die and packaged products from astate-of-the-art facility near Salt Lake City, Utah

FEATURES••••
••••
•
•

CMS Series Part Number Configurator

Compact size 6.8mm X 6.8mm
Wide pressure range options: from 2 to 150PSI
Pressure Type: Absolute or gage
Electrical Connection: SMD solder pads, 1.27mm standard spacing
Output: Digital I2C and SPI
Burst pressure: 2 to 100 times maximum operating pressure(depending on pressure range)
Low power mode
Wide Supply Voltage: 2.7V to 5.5V
Compensated temperature range: 0C to 50C or -15C to 85C
Autozero and output signal averaging*

APPLICATIONS
Industrial: Pneumatic systems
Medical: Equipment for diagnosis and analysis
Consumer: Appliances and electronics
Other: Dry non-corrosive gas pressure applications*For more information about Autozero and output averaging function
please contact Merit Sensor.

1610-XXXX-XXXX-XXX
Full Scale Pressure
1P4 = -5 to +100 cmH2O
2P1 = 150 cmH2O
015 = 1 bar
030 = 2 bar
145 = 10 bar
Pressure TypeA = Absolute
G = Gage
C = Custom
D = Differential
Calibrated
TemperatureRange
1 = 0 to 50C Standard
2 = -15 to 85C Extended
Comm.
Address1
0 = 0x28
1 = 0x48

ElectricalConnection
1 = SMD gold
plated pads
Pressure Port
1 = 3X3mm portwith gel2 = 3X3mm port 		no gelAccuracy
0 = Standard
Calibrated
Supply Voltage
1 = 5.2V
2 = 5V3 = 3.3V
4 = 2.7V
Output
1 = Digital 10%
to 90%2
2 = Digital 10%
to 90%3

Notes:
21
Other I C addresses available upon request
2Start up condition is Sleep Mode (Very Low Power)
3Start up condition is cyclic Mode

Sales +1 801.208.4722 · Customer Service +1 801.208.4700 · Fax +1 801.208.4798 · sensors@merit.com · www.MeritSensor.com
1600 W. Merit Parkway · South Jordan, Utah · 84095 · USA

DS-045T – CMS1610 Technical Datasheet.002

ARYN
I
ELIM

PR

SPECIFICATIONSParameter

Minimum

TypicalMaximum

Units

Notes

5.5

V

3.3mA

4000

V0Vs

V

According to the Human Body Model. As per
ASIC`s datasheet.
End of conversion. This pin is active for 5us after
each new pressure calculation is performed.

Output Range (Vout)

1090% of counts

2^24 counts

Resolution

16 (TBD)

Electrical
Supply Voltage (Vs)

2.7

Supply Current

0.006

3ESD Protection
EOC Pin

Minimum current rated at sleep mode

Performance
22 (TBD)

bits

Startup Time

2.5

ms

Power on to full operation time

Wake Up Time

2ms

Sleep mode to full operation time

Update Time (digital mode)
AccuracyStandard Temperature Range
0 to 50 ˚CExtended Temperature Range-15 to 0 and 50 to 85

185ms

-1.5%

+1.5%

FSO-5%5%

FSO

Accuracy includes all error for pressure andthermal hysteresis and linearity over the entire
operating temperature range. It does not include
lifetime drift.

Lifetime Drift-22%FS

1000 hours @85C

Static Proof Pressure

2.5x

FS

Burst Pressure

10x

FS

Up to 30PSI parts

Burst Pressure

300

PSI

Above 30PSI parts

Environmental
Operating Temperature-4085°C

Storage Temperature-4085°C

WeightMedia Type

0.197

g

Dry non-corrosive gases

Digital Interface (for reference only)
I2C™ voltage level HIGH

0.7x

1.0x

Vs

I C™ voltage level LOW

00.3x

Vs400

kHz3MHz2SCL clock frequency
SPI Interface Clock

0.05

SPI voltage level High

0.7x

1.0x

Vs

SPI voltage level LOW
Delay time [a] between
SS-activationedge and first edge of SLCK,MOSI or MISO
Delay time [a] between SSdeactivation edge and last edgeof SLCK, MOSI or MISO

0.00.3

Vs

Delay between SS-deactivationedge of last command and of
SS-activation edge for nextcommand

1150nS

150nS

10µS

fSCL

I C TIMING DIAGRAM (FOR REFERENCE ONLY)
2ARYNIELIMCMS Series

PRMERIT SENSOR CMS1610 I2CTM COMMUNICATION• If the part is in sleep/low current mode (see part configurator), the first command regardless of the command type will take partout of sleep once the command has been completed, the part returns to sleep mode.
Once the command has been completed, the part returns to sleep mode.

The following commands are available for the device:
CommandDescription

Sleep Mode

Command Mode

Cyclic Mode

0xA8Start Sleep Mode

NOYES

YES

0xA9Start Command Mode

YESNO

YES

0xAA

Single Measurement

YES*

YESNO0xAB

Enter CYCLIC Mode φYESYESNO0xAC

Returns Mean of 2 measurements

YES*YESNO0xADReturns Mean of 4 measurements.

YES*

YES

NO

0xAE

Returns Mean of 8 measurements.

YES*YESNO0xAF

Returns Mean of 16 measurements

YES*YESNO*The device will power on (2-10 µS depending on configuration), take measurements and return to sleep mode.
Φ Reading a 4 bytes (Status and Pressure only) or 7 bytes (Status, Pressure and Temperature) at any time will return the most current
measurement. Note: Status can show as “BUSY” during cyclic mode.

• Please note: writing to any other registers can disable the part or degrade the accuracy*For more information about Autozero and output averaging function please contact Merit Sensor

ARYNIELIMPR

Examples:While in command mode, to read the serial ID of the sensor, use the following command string: 0x00
The device will respond with it’s serial number, as shown in the next section, example (a).
Reading data from the sensor. Data will come back in the following format:*Note: The TempData refers to the internal not calibrated temperature sensor and should not be used as a temperature reference.
A 4 byte read will result in only status and sensor data.
• The first Byte (8 bits) returned is the “Status” of the part. It can be decoded in the following manner:
Bit Number

76543210Meaning

0PoweredBusyMODEMODE

MemoryErrorConnection
fault

MathSaturation° MODE meaning (bits 3 & 4):– MODE = 00 is Command Mode  – MODE = 01 is CYCLIC Mode (Bit 5 is also set)  – MODE = 10 is SLEEP ModeAll others reserved

SPI COMMUNICATIONSPI Timing Diagram

ARYNI
ELIMPR

CMS Series

MERIT SENSOR CMS1610 SPI COMMUNICATION• To start a communication via SPI, the /SS (pin 01) must be at zero, the CMS SPI comm is configured by default for clock polarity andphase = 0 and Slave select = 0• Upon power up, part will be in sleep/low current mode. Sending the SS pin to zero will take I Mode, each command except NOP isstarted as shown in below. Note: A command request always the part out of sleep mode into command mode.
• In SPI Mode, each command except NOP is started as shown in below. Note: A command request always consists of 3 bytes. If thecommand is shorter, then it must be completed with 0 s. The data on MISO depend on the preceding command.

• After the execution of a command (busy = 0), the expected data can be read as illustrated below° Reading data after a Memory Read command:° Reading data after a Measure command (AAHEX)*Note: The TempData refers to the internal not calibrated temperature sensor and should not be used as a temperature reference• If no data are returned by the command, the next command can be sent. The status can be read at any time with theNOP command

TRANSFER FUNCTION EXAMPLE

TRANSFER FUNCTION FORMULA(Ppsi = ( Pmax – Pmin•

Pcounts -0.1 • Max
0.8 • Max+ Pmin

Where– Vmin
P= Measured Vpressure
outPpsi = ( Pmax – Pmin •+ Pmin
– VminMerit Sensor
Pcounts = Pressure counts
part
Vmax fromPmin = Minimum working pressure
Pmax = Maximum working pressure
Max = Maximum output counts@24bits = 16777216(0.030ARYNI
ELIMVsPR
ELECTRICAL

*C1

*R1

*R2

GND

CMS1610SCLMEMS

SDA / MOSI

ASIC

EOC/SSMISO

N.C.

GND

*Notes:• A 100nF power supply decoupling ceramic capacitor is recommended. Pleaseinstall this capacitor as close to the part as possible• A 3.3k to 10k ohms pull up resistor from SDA and SCL to Vs is required whenusing I2C communication[1.27]
0.050
01

02

03

04

[3.68]
0.145[2.21]
0.087

Pin 01 Identifier

Vent Hole

*

[0.8]
0.030

08

07

06

05

*Note:• Please keep the vent hole unblocked and free of contaminants

PinFunction

01

Slave Select (SPI)

02

MISO

03

MOSI / SDA

04

SCL

05

Vsupply (2.7~5.5V)

06

GND07

Aout08EOCARYNIELIMDIMENSIONS FOR STANDARD OPTIONS [MM]:CMS SeriesPR

SMD Solder Pads Size: 2.2 X 0.8mm
[6.8]
.267

[3.0]
.118

[3.0]
.118

[1.0]
.040

[0.2R.0 ]
08

[5.9]
.232

[6.8]
.267

[5.9]
.232

[2.5]
.099

Dimensions for reference only. Engineering drawings(with tolerance) available upon order

[3.0]
.118
0.004

PACKAGING AND SHIPPING (TAPE AND REEL)

1.50
2.00 [.079]
P24.00 [.157]
Po+0.100.00 0.059
Do+0.004
0.000

1.75 [.069]
E1

11.50 [.453]
F

24.00 [.945]
NOMINAL
22.25 [.876]
E2

1.50 [0.059]
D1

16.00 [.630]
P

image.png

24.30 [.957]
MAXW

SUGGESTED LAND PATTERN (*FOR REFERENCE ONLY)
Dimensions in mm [inches][.092]
2.33[.036]
0.92[.146]
3.70[.237]
6.03[.050]
1.25[.186]
4.73*Note: The land pattern shall be tested on customers application and equipment before used in production

Merit Sensor is based in Salt Lake City, Utah

Sales +1 801.208.4722 · Customer Service +1 801.208.4700 · Fax +1 801.208.4798 · sensors@merit.com · www.MeritSensor.com
1600 W. Merit Parkway · South Jordan, Utah · 84095 · USA