Interferometry applications

Simpler, faster, morerobust

Insensitive to vibrations
At-wavelength metrology
Parallel optics testing

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MESO DATA SHEETMESOTMNew metrology solution
for easy at-wavelength
testing of flat surfaces inany environment
MESO is the perfect tool
for the characterization of:+ Parallel Optics+ Screens+ Filters, dichroics+ Mirrors+ Beamsplitters+ Windows, substrates+ Corner cubes+ Crystals+ Rods, disks+ Glass wafers+ Displays+ Machined surfaces+ Windshields+ Prisms+ Large lenses+ Optical systems, beamexpanders

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APPLICATIONS+ In situ process control+ Thin Parallel Optics characterization+ Transmitted wavefront quality (TWE)+ Surface shape & flatness measurement (RWE)+ Large optics testing+ Wedge measurement

FEATURES+ Insensitive to vibrations thanks to fast single shot acquisition andthe lack of need for a reference arm for comparison.
It allows for a standalone setup compatible with shop floor
metrology!
+ At-wavelength sample testing due to its achromatic systemembedding up to 4 light sources, automatically controlled by the UserInterface.
+ Insensitive to reflections from the back surface of the sample
thanks to a unique patent pending method.
No surface preparation of the sample is needed, avoiding added
steps that could disturb the metrology and put the sample at risk.
+ Smart maintenance: On-site user install or replacement of sources
with no opening of optical areas and no realignment needed.

MESO DATA SHEETSPECIFICATIONS
Optical configuration
Mounting configuration
Test beam diameters
Optical axis
Calibrated range
Working output wavelengths
Output polarization
Phase point resolution
Minimum exposure time
CameraInterface
System software
Warranty
Dimension / WeightVibration isolation
Compressed air
Sample reflectivity
Sample min. thickness
RMS wavefront repeatability*

double-passhorizontal or vertical
optical zoom from 1.5’’ (38.1 mm) up to 6’’ (152 mm)
4.25” (108 mm)
405 nm to 1064 nm
custom 405 nm, 488 nm, 520 nm, 635 nm, 785 nm, 830 nm, 1064 nm
optional linear, circular
680 x 500
27 ms
4096 x 3000 pixels, 10 bits
USB 3.0high performance DellTM computer & 24’’ touchscreen, Windows 10,
WaveSurfTM acquisition control & analysis software
1 year system & laser standard, extendable
63 x 30 x 45 cm / 25 kg
not necessary
not necessary
1% - 100%, no attenuation required
100 mm
1 nm

1100
1000
900
800
700
600

MESO

wavelength range
(nm)

500

From a set of 36 measurements on a Ø4’’ diameter flat mirror, each of them averaged 16times, a synthetic reference is defined by the mean of the 18 odd measurements. The RMS
wavefront repeatability is then defined by the mean RMS difference plus 2x the standard
deviation of the difference between the 18 even measurements and the synthetic reference.

*400350

ACHROMATISM
Plane optics measured on Ø4’’ diameter at 3 wavelengths: wavefront error variation is less than 4 nm RMS (< l/150)

wavelength: 402 nm
wfe: 53 nm RMS

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wavelength: 635 nm
wfe: 57 nm RMS

wavelength: 785 nm
wfe: 57 nm RMS

MESO DATA SHEETSOFTWARE
WAVESURFTM
Easy-to-use interface
Wavesurf allows operators and engineers in manufacturing environments to perform wavefront and surface
characterization of flat optics and large lenses with just a few clicks. Scripted testing procedures guide users
through all the steps. It makes control easy, automated and error-proof.
+ Touchscreen interface control+ Scripted testing procedures guidethe user through all the steps+ Automated control of up to 4
embedded wavelengths+ Automated control of test
diameter (optical zoom)+ Complete automated test report+ ISO10110 standard compliance+ Data format compatible with
CODE V® and MetroProTM

WHITE PAPERS+ Shop floor measurement: vibration-proofed solutions for optical metrology+ At-wavelength metrology for optical systems and surfaces+ Parallel optics testing: simultaneous characterization of both optical faces in laboratory and manufacturingconditions

Imagine Optic Headquarters
18, rue Charles de Gaulle
91400 ORSAY · France

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MESO DATA SHEET