JEOL Products Guide

Products Guide 2023

Nanometrology
Fabrication
Characterization

Introduction
Thank you for your interest in JEOL products and services.
JEOL designs and manufactures scientific instruments for high-level research and development
activities. Our customers include scientists and engineers working in leading-edge academic andindustrial laboratories around the world. JEOL products and services enable them to pursue avariety of R&D applications that require high resolution imaging and analytical capabilities
such as: basic observation and analysis, environmental science, information technology,
semiconductor production, biotechnology, nanotechnology, and a broad range of industrial
endeavors.
Experts involved in the studies of medicine, biology, biochemistry, agriculture, materials science,
metallurgy, ceramics, chemistry, petroleum, pharmacy, semiconductors and electronic materials
have been using JEOL products for more than 70 years. Our new products are easier-to-use thanever before and contribute to a high level of quality assurance and quality control during the
production process.
This Product Guide presents the most current high performance solutions from JEOL to meetyour R&D requirements for electron optics, analytical, semiconductor, industrial, and medical
instruments and equipment. For more details or information about any of our products, pleasecontact your nearest JEOL office.

JEOL Ltd.

Company Profile
Name: JEOL Ltd.
Address (head office): 1-2, Musashino 3-chome, Akishima, Tokyo 196-8558,
Japan Establishment: May 30, 1949
Capital: 21,394,180,000 yen (as of end of March 2023)
Consolidated sales: 162,689 million yen (as of end of March 2023)
Number of employees: 3,351 (for JEOL Group as of end of March 2023)

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Contents

Scientific/Metrology Instruments

Industrial Equipment

Medical Equipment■ Transmission Electron Microscopes (TEM)

P. 3■ Scanning Electron Microscopes (SEM)

P. 6■ Ion Beam Application Equipment

P. 9■ Peripheral Equipment

P.10■ Instruments for Microarea and Surface Analysis

P.11■ X-ray Fluorescence Spectrometers

P.12■ Electron Diffractometer

P.12■ NMR Spectrometers

P.13■ ESR Spectrometers

P.14■ Mass Spectrometers

P.15■ Semiconductor Equipment

P.18■ Metal AM Machine

P.19■ Industrial Equipment for thin-film formation and material processing

P.19■ Clinical Chemistry Analyzers

P.21* Some instrument photographs include optional attachments.
* Specifications subject to change without notice.
* This catalog includes products not offered in some territories.
* W indows is a registered trademark of Microsoft Corp. in the U.S. and other countries; Macintosh is trademark of Apple Computer Inc.,
registered in the U.S. and other countries; UNlX is a registered trademark of X/Open Corp. of the USA; NetWare is a registered trademark of
Novell Inc. in the U.S. and other countries; NetWare Lite is a trademark of Novell Inc. in the U.S. and other countries; Pentium is a registeredtrademark of Intel Corp. of the USA.
* Other trademarks referenced in this catalog and marked with* are the property of our allied companies.

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Transmission Electron Microscope

JEM-ARM300F2 GRAND ARM™2

Atomic Resolution Analytical Electron Microscope
The “GRAND ARM™” has been upgraded. The JEM-ARM300F2 GRAND ARM™2
is JEOL’s flagship EM that combines ultrahigh spatial resolution observation andhigh sensitivity X-ray analysis at a wide range of accelerating voltage from low
acceleration to high acceleration.
With the adoption of a new enclosure cover that can reduce the effect ofenvironment changes as well as improved acoustic noise resistance of the column,
the ultimate microscope stability has been realized.
● Resolution: 0.053 nm (300 kV, with STEM corrector)● Accelerating voltage: 40 to 300 kV (standard 80 kV, 300 kV)● Electron gun: Cold field emission gun (CFEG)NEOARM JEM-ARM200F

Atomic Resolution Analytical Electron Microscope
New Atomic Resolution Analytical Electron Microscope “NEOARM” JEM-ARM200F
comes with JEOL’s unique cold field emission gun (Cold-FEG) and a new Cs
corrector (ASCOR) that compensates for higher order aberrations. The combinationof a Cold-FEG and ASCOR enables atomic-resolution imaging at not only 200 kV
accelerating voltage, but also a low voltage of 30 kV.
“NEOARM” is also equipped with an automated aberration correction system thatincorporates JEOL’s new aberration correction algorithm for automatic fast andprecise aberration correction.
We will deliver high throughput atomic resolution images to everyone.
● Resolution: 0.071 nm (UHR) for HAADF-STEM image● Accelerating voltage: 30 to 200 kV (standard 80 kV, 200 kV)● Electron gun: Cold field emission gun (CFEG)

Scientific/Metrology Instruments

3

JEM-3300 CRYO ARM™ 300 II

Field Emission Cryo-Electron Microscope
CRYO ARM™ 300 II is a cryo-electron microscope that specializes in theobservation of electron beam-sensitive specimens, such as proteins, for single
particle analysis, tomography and MicroED. This system offers improved stability,
throughput and ease of use compared to the previous generation of cryo-EMs.
Moreover, this is an all-in-one system that can handle everything from screening todata acquisition, allowing for more flexibility in operation at customer sites to meetthe needs of the facility. These improvements allow users to obtain high quality
images by simple operation even for those who have never used an electron
microscope before.
● Standard accelerating voltage: 300 kV, 200 kV● Energy filter: In-column Omega energy filter● Accessory: Hole-free phase plate● Maximum tilt angle: ±70°
● Specimen cooling temperature: 105 K or less● Specimen storage: Up to 12 specimens can be held.
● Electron gun: Cold field emission gun (CFEG)

JEM-Z200CA CRYO ARM™ 200 II

Field Emission Cryo-Electron Microscope
CRYO ARM™ 200 II is a cryo-electron microscope that specializes in single particle
analysis used for 3D structure analysis of proteins, etc. In line with the JEOL CRYO
ARM™ series, this system is equipped with a CFEG, an in-column energy filter, aside-entry liquid-nitrogen cooling stage and an automated specimen exchangesystem. The automated exchange system enables the storing of up to 12 samples
and allows for the exchange of one or more samples, thus enabling flexible
observation scheduling by multiple users. Moreover, this cryo-EM incorporates a
newly-designed high resolution pole-piece for acquiring higher-quality images.
● Standard accelerating voltage: 200 kV (option: 100 kV, 80 kV)● Energy filter: In-column Omega energy filter● Specimen cooling temperature: 105 K or less● Specimen storage: Up to 12 specimens can be held.
● Electron gun: Cold field emission gun (CFEG)

Scientific/Metrology Instruments

4

JEM-ACE200F

High Throughput Analytical Electron Microscope
The JEM-ACE200F is an electron microscope responding to the system allowing for an operator to obtaindata without operating the electron microscope by creating recipes for operation workflow.
Since the JEM-ACE200F inherits hardware technologies of the JEM-ARM200F high-end TEM and the
JEM-F200 multi-purpose FE-TEM, this high throughput analytical electron microscope provides superblyhigh stability and analytical capabilities with a renewed sophisticated exterior design.
● STEM resolution: 0
 .10 nm (200 kV, STEM Cs corrector installed)● TEM resolution:

0.10 nm (200 kV)● Accelerating voltage: 60 kV to 200 kV (standard 80 kV, 200 kV)● Electron gun: C old field emission gun (CFEG)

JEM-F200

Multi-purpose Electron Microscope
JEM-F200 (nickname: F2) is a multi-purpose electron microscope of the new generation to meet today’s
diversified needs. JEM-F200 incorporates a new probe-forming lens system, CFEG and Dual SDD system
required for high-resolution analytical systems, leading to high-throughput materials analysis.
“SPECPORTER™” for automatic holder insertion and retraction is also incorporated, enabling us tosmoother microscope operation.
● Point resolution: T EM point to point: 0.19 nm (with CF-UHR)

TEM lattice image: 0.10 nm (with CF-UHR)
STEM-HAADF image: 0.14 nm (with CF-UHR)● Accelerating voltage: standard 200 kV, 80 kV● Magnification: ×20 to ×2,000,000 (TEM) / ×100 to ×150,000,000 (STEM)

JEM-2100Plus

Electron Microscope
The JEM-2100Plus is a multi purpose transmission electron microscope, which combines the proven
JEM-2100 optic system with an advanced control system for enhanced ease of operation. Achieving
superior performance through intuitive operation, the JEM-2100Plus provides solutions to a wide range ofapplications from materials science to medical/biological studies.
● Point resolution: 0.19 nm● Accelerating voltage: 80 kV to 200 kV● Magnification: ×30 to ×1,500,000

JEM-1400FlashElectron Microscope
Equipped with a high-sensitivity sCMOS camera, the JEM-1400Flash offers new “Insight” for TEM users via
powerful new functions, including an ultra-wide area montage system and an OM (optical microscope)
image linkage function.
● Resolution: 0.2 nm (HC) / 0.14 nm (HR)● Accelerating voltage: 10 kV to 120 kV● Magnification: ×10 to ×1,200,000 (HC) / ×10 to ×1,500,000 (HR)● Maximum tilt angle (Tilt-X): ±70° (HR/HC)
Note: The optional high tilt specimen holder is required.

Scientific/Metrology Instruments

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Scanning Electron Microscopes

JSM-IT800

Schottky Field Emission Scanning Electron Microscope
The JSM-IT800 employs an easy-to-use graphical user interface, called “SEM
Center”, which serves as a common platform enabling a full range offunctionality from high resolution observation to high speed elemental mapping.
This platform features a JEOL In-Lens Schottky Plus Field Emission Electron
Gun, a next-generation electron optical control system, “Neo Engine”, and afully embedded JEOL EDS system. The JSM-IT800 satisfies various needs ofusers by utilizing a hybrid design of SEM objective lens. Five versions areavailable based on the objective lens type: Hybrid Lens (HL) version as generalpurpose FE-SEM, Super Hybrid Lens (SHL) versions (two versions for different
configurations) for observation and analysis at ultra-low accelerating voltage
and at highest resolution, and Semi-In-Lens versions (two different
configurations: “i” and “is”) for observation of semiconductor devices.
Moreover, new backscattered electron detectors, Scintillator BSE detector andVersatile BSE detector are adopted. The SBED enables acquisition of material
contrast image of good responsiveness at low accelerating voltage, while the
VBED enables acquisition of 3D, compositional, and material contrast image.

JSM-IT800(HL version)● Resolution: HL: 0.7 nm (20 kV), 1.3 nm (1 kV)

SHLs: 0.6 nm (15 kV), 1.1 nm (1 kV)
SHL: 0.5 nm (15 kV), 0.7 nm (1 kV)
i: 0.5 nm (15 kV), 0.7 nm (1 kV)
is: 0.6 nm (15 kV), 1.0 nm (1 kV)● Accelerating voltage: 0.01 to 30 kV● Direct magnification: H
 L: ×10 to ×2,000,000 (128 × 96 mm print size)
SHL/SHLs: ×10 to ×2,000,000 (128 × 96 mm print size)i / is: ×25 to ×2,000,000 (128 × 96 mm print size)● Display magnification: H
 L: ×27 to ×5,480,000 (1,280 × 960 pixels on display)
SHL/SHLs: ×27 to ×5,480,000 (1,280 × 960 pixels on display)i / is: ×69 to ×5,480,000 (1,280 × 960 pixels on display)
Electrostatic lensElectromagnetic/electrostatic field
superposed type
HL /SHL /SHLs

Semi-In-Lens type（i/is）

Stunning images inspire
the future

Superb performance SEM
for any user

Scientific/Metrology Instruments

6New Product
JSM-IT710HR

Schottky Field Emission Scanning Electron Microscope- Clear visibility promotes new discovery The JSM-IT710HR is the latest model of HR series for anyone to easily acquire
high resolution images. A new low-vacuum secondary electron detector and
3D live observation function have achieved further enhanced observation
performance. This new SEM improves stability of the electron gun (4 times
higher stability than the previous model) that delivers a maximum probe currentof 300 nA. With expanded automatic measurement functions, automatic
analysis at FE-SEM resolution is easier than ever to use.
● Resolution: High vacuum mode: 1.0 nm (20 kV), 3.0 nm (1 kV)

Low vacuum mode: 4.0 nm (30 kV, BED)
Analysis performance: 3.0 nm (15 kV, probe current 3 nA)● Accelerating voltage: 0.5 to 30 kV● Direct magnification: ×5 to ×600,000(defined with a print size of 128 mm × 96 mm)● Display magnification: ×15 to ×1,767,305, Image magnification on the monitor(defined with a display size of 377 mm × 283 mm)

JSM-IT510

Scanning Electron Microscope
The JSM-IT510 is the highest-end model of our thermionic-emission SEMs. With the new Simple SEM
function, you can leave your daily routines (respective operation) to the instrument, allowing for more
efficient observations. This SEM is also equipped with a large multi-purpose chamber (200 mm dia.) for
simultaneous analyses of various kinds.
● Resolution: High Vacuum Mode: 3.0 nm (30 kV), 15.0 nm (1.0 kV)

Low Vacuum Mode: 4.0 nm (30 kV, BED)
● Accelerating voltage: 0.3 to 30 kV● Direct magnification: ×5 to ×300,000 (print size of 128 mm × 96 mm)● Display magnification: ×14 to ×839,724 (display size of 358 mm × 269 mm)

New Product
JSM-IT210

Scanning Electron Microscope- Guided operation for necessary data acquisition The JSM-IT210 is a thermionic-emission SEM that inherits compact design ofthe previous model and provides simple operation and high cost performance.
“Simple SEM” function is added for automated SEM imaging and EDS analysis
by simply selecting the field of view, and the 5-axis motor control stage is builtin like the higher-end model. With these features, observation, analysis andstage performance is enhanced, significantly improving the comprehensive
strength of SEM.
● Resolution: High vacuum mode: 3.0 nm (30 kV), 15.0 nm (1 kV)

Low vacuum mode: 4.0 nm (30 kV, BED)
● Accelerating voltage: 0.3 to 30 kV● Direct magnification: ×5 to ×300,000(defined with a print size of 128 mm × 96 mm)● Display magnification: ×15 to ×883,652(full screen display by standard monitor)

Scientific/Metrology Instruments

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JCM-7000 NeoScope™

Benchtop Scanning Electron Microscope
JCM-7000 is a new benchtop scanning electron microscope with helpful functions. Low vacuum (LV) mode
makes it possible to observe without sample preparation. Stage Navigation System helps users easily look
for the area of interest. Zeromag provides smooth transition from optical images to SEM images. Live
Analysis enables real-time elemental analysis during observation. Furthermore, Live 3D gives 3D image
restructure simultaneously with the SEM image. JCM-7000 has incorporated those new functions with theaim of enabling anyone to perform observations and analysis.
● Direct magnification: ×10 to ×100,000 (Magnification is defined by 128 mm × 96 mm)● Monitor magnification: ×24 to ×202,168 (Magnification is defined by 280 mm × 210 mm)● Specimen size: 80 mm diameter● Main options: EDS (energy dispersive X-ray spectrometer),Stage Navigation System, Tilting and Rotating Motor Drive HoldermmiXcroscopy™

Linked Optical and Scanning Electron Microscope System
The same specimen holder is used for both the optical microscope (OM) and the scanning electron
microscope (SEM). By managing the stage data using dedicated software, the sites viewed with the optical
microscope are saved, making it possible to view the fine structures at the same sites at even greater
magnification using the scanning electron microscope.

OM

SEM

SXES Series

Soft X-ray Emission Spectrometer Series
The Soft X-ray Emission Spectrometer (SXES) achieves superbly high energy resolution with combination ofa newly developed diffraction grating and a high-sensitivity CCD camera. SXES allows parallel detection
comparable to EDS and surpasses WDS in terms of energy resolution.
It is excellent at chemical state analysis and detection of trace elements. This spectrometer is used with anelectron probe micro-analyzer (EPMA) or an FE-SEM.

SMILE VIEW™ Standard

Analysis & Measurement Integrated Software
The SMILE VIEW™ Standard simplifies the user interface of the highly regarded SMILE VIEW™ Program
which is a PC-based system facilitating a series of operations of listing to printing of images saved in thesame folder. An image sharpening function is also added to this new program.

Scientific/Metrology Instruments

8Ion Beam Application Equipment
New Product
JIB-PS500i

FIB-SEM System
The JIB-PS500i combines the high image quality, high-resolution SEM and high-performance FIB enabling
accurate and high-quality TEM specimen preparation at the intended area of the specimen. The large
specimen stage with large tilt angles makes it easy to perform TEM specimen preparation such as trimming
specimen blocks. Check and Go function enables a screening check of prepared specimens with a
newly-developed STEM detector. The use of the double-tilt cartridge and TEM holder facilitates a linkage of
FIB and TEM.
● SEM resolution: 0.7 nm at 15 kV, 1.4 nm at 1 kV, 1.0 nm at 1 kV in BD mode
● FIB resolution: 3 nm at 30 kV● FIB probe current: 1.0 pA to 100 nA

JIB-4700F

MultiBeam System
The JIB-4700F features a hybrid conical objective lens, GENTLEBEM™ (GB) mode and an in-lens detector
system to deliver a guaranteed resolution of 1.6 nm at a low accelerating voltage of 1 kV. Using an In-Lens
Schottky FEG that produces an electron beam with a maximum 300 nA probe current, this new FIB-SEM
allows for high-resolution imaging and fast analyses. For the FIB column, a high-current density Ga ion
beam with a maximum 90 nA probe current is employed for fast ion milling and processing of specimens.
● SEM image resolution: 1.2 nm (15 kV, GB mode), 1.6 nm (1 kV, GB mode)● FIB image resolution: 4.0 nm (30 kV)● FIB probe current: 1 pA to 90 nA

IB-19530CP

CROSS SECTION POLISHER TM (CP)The IB-19530CP adopts a newly-developed, multi-purpose stage to meet increasingly diversified market
needs and provides multi-functionality by the use of different types of specialized functional holders.
The multi-purpose stage combined with these holders expands its applications to planar surface millingand polishing, sputter coating as well as conventional cross-section ion milling.

IB-19520CCP

Cooling CROSS SECTION POLISHER TM (CP)The IB-19520CCP Cooling CROSS SECTION POLISHER™ incorporates a specimen cooling system
suitable for specimens susceptible to beam damage. A new air isolation system transfers a specimen
between SEM and CP in an air-isolated environment. Its unique cooling system can cool the specimen for
8 h or more only with 1 L liquid nitrogen, enabling specimen exchange in a short time while liquid nitrogen isheld. It features high-throughput milling (milling speed) of 500 μm/h (Si single crystal, protrusion: 100 μm).

Scientific/Metrology Instruments

9Peripheral Equipment

EC-52000ICION CLEANERThis is a device for removing hydrocarbon contaminants deposited on the sample using physical andchemical reactions while maintaining the sample in a glow discharge. Collecting the hydrocarbon
contaminants helps to prevent the generation of sample contamination when an electron beam is irradiatedonto the sample by an electron microscope, and by accumulation of hydrocarbon contaminants(contamination).

DII-29020HD
HD Treatment

HD Treatment is a device that was designed with the electron microscope sample fabricator in mind,
offering the long-desired hydrophilic treatment applicable to a wide range of samples prepared for TEM and
SEM. Operation is exceptionally easy; all processing from start to finish is fully automatic.

JEC-3000FC

Auto Fine CoaterThis device consists of a main unit and a rotary pump, and is used mainly to prepare specimens forscanning electron microscopes. Various types of coatings can be deposited onto biological and othernon-conductive specimens efficiently in a short time.

DII-29010SCTR / DII-29030SCTR
Samples for use in a scanning electron microscope are coated with a metal (Au, Pt) to prevent charging of
the specimen and improving the generation efficiency of secondary electrons, thus making it possible toimprove the quality of the observed images.

Scientific/Metrology Instruments

10Instruments for Microarea and Surface Analysis

JXA-iHP200F / JXA-iSP100
Electron Probe Microanalyzer

JXA-iHP200F and JXA-iSP100 are integrated EPMA with enhanced features, achieving more efficient
operations from observation to analysis based on the concept “anyone can easily perform microanalysis in
defined regions of interest”.
Functions to realize high throughput such as Auto Loader, Stage Navigation System, and “Live Analysis”
function are equipped as standard. Moreover, as JXA-iHP200F and JXA-iSP100 have high expandability,
they can serve for diversified analysis purpose by incorporating detectors such as soft X-ray emission
spectrometer (SXES), crystal orientation analysis system (EBSD), and cathodoluminescence detector (CL).
JXA-iHP200F

JXA-iSP100

JAMP-9510F

Field Emission Auger Microprobe
The JAMP-9510F is a high-grade field-emission Auger Microprobe, featuring high-throughput chemicalstate analysis achieved by a hemispherical electrostatic energy analyzer (HSA) and large probe current
even at small probe diameter offered by an FEG. Combining a eucentric tilt stage and a charge neutralizing
gun allows analysis of insulating materials as well as metals. Auger analysis extends from chemicalcomposition to chemical-state information for any sample.

JPS-9030

Photoelectron Spectrometer (XPS)The JPS-9030 is a multi-purpose XPS adopting newly-developed software for greater ease-of-use. A new
Kaufman-type etching ion source is installed in the specimen exchange chamber to prevent contaminationof the measurement chamber. In addition to the standard Mg /Al twin anode, an infrared heating system
and an Ar gas cluster ion source are available.

Scientific/Metrology Instruments

11

X-ray Fluorescence Spectrometers

JSX-1000S

Energy-dispersive X-ray fluoresence spectrometer
By adopting a new optical system, abundance of filter configurations and SDD,
the JSX-1000S energy dispersive X-ray fluorescence spectrometer provides
even higher sensitivity. Other new features are a touch panel that allows
intuitive operation, automated measurement menus provided by the solution
application, as well as a smart FP method of standard-less analysis withenhanced accuracy.

Electron Diffractometer
New Product
XtaLAB Synergy-ED
Electron Diffractometer

The XtaLAB Synergy-ED is a new and fully integrated electron diffractometer that uses electron beams tocreate a seamless workflow from data collection to structure determination of three-dimensional molecular
structures. The XtaLAB Synergy-ED is the result of combining core technologies to achieve synergy
between Rigaku's high-speed, high-sensitivity detector (HyPix-ED) and single crystal analysis software(CrysAlisPro ED) and JEOL's transmission electron microscope technology. By creating a seamless workflow
from sample selection (nanocrystals) to data collection and structure analysis, the XtaLAB Synergy-ED
makes electron diffraction easily accessible to non-experts who do not have the expertise in electron
microscopy and crystallography that is typically required.

❶ Select the target crystal❷ Measure and analyze using electron diffraction

Scientific/Metrology Instruments

12❸ Analyze crystal structure

NMR Spectrometers

JNM-ECZL (ECZ Luminous™) series
FT NMR System

The JNM-ECZL series (ECZ Luminous™) is an FT NMR system equipped withstate-of-the-art digital and high-frequency technologies. The highly integrated Smart
Transceiver System, a high-speed, high-precision digital high-frequency control
circuit, enables further miniaturization and ensures the stability of spectrometer.
The new Multi Frequency Drive System enables multi-resonance measurements in astandard configuration, providing a wider range of solutions.

ECZL G seriesThis is a flagship model that supports diversified, cutting-edge solutions, including
high-magnetic-field, and solid-state NMR measurements. The system is flexible interms of expansion, with support for three or more channels, high-power amplifiers,and high-power magnetic field gradients.
● Frequency: 400 MHz to 1.3 GHz● Sample type: solution/solid● Number of channels: 2 (standard), expandable up to 8 channels● Power amplifier: High frequency side

400 to 600 MHz, 100 W, 700 MHz or higher, 200 W
500 W /1000 W (as an option)
Low frequency side
400 to 600 MHz, 300 W, 700 MHz or higher, 500 W
1000 W /2000 W (as an option)● Magnetic field gradient amplifier: 10 A (standard), 30 A /50 A (as an option)

ECZL R seriesThis is a compact model that supports solid-state NMR measurements. Its footprint
is less than 50% of the JNM-ECZR.
● Frequency: 400 MHz to 600 MHz● Sample type: solution/solid● Number of channels: 2● Power amplifier: High frequency side 100 W, Low frequency side 300 W● Magnetic field gradient amplifier: 10 A

ECZL S seriesThis is an entry-level model dedicated to 400 MHz solution NMR while incorporating
the high-performance digital high-frequency technology of the ECZL series.
● Frequency: 400 MHz● Sample type: solution● Number of channels: 2● Power amplifier: High frequency side 50 W, Low frequency side 150 W● Magnetic field gradient amplifier: 10 A

Scientific/Metrology Instruments

13ASC series

Auto Sample Changer
An automatic sample changer makes it possible to measure many samples sequentially by exchanging
multiple samples automatically one by one. Four changer models are available for 24 samples, 30 samples,
64 samples and 100 samples.

ASC64 (64 samples)

ASC24 (24 samples)

ASC30 (30 samples)

ASC100 (100 samples)

JNM-ECZR series
Solid-state NMR

Solid-state NMR probe

Solid-state NMR accessories are used to measure solid samples (powder or film-like samples). The solidstate NMR technique is effective for samples not soluble in solvents (inorganic samples, etc.) and of
crystalline polymorph that is meaningful to measure in the solid state. The AUTOMAS probe, rotor carrier
and auto sample changer enable automatic measurements of multiple samples like solution NMR.
Sample tube forsolid-state NMR

Rotor carrier for
AUTOMAS probe
8 mm

4 mm

3.2 mm

1 mm

2.0 mm0.75 mmESR Spectrometers
JES-X3 series

ESR Spectrometers
Recently, it has been widely
accepted that even relatively few
unpaired electrons in a sample
can affect the function of thematerial, so a lower detection
limit (higher sensitivity) is requiredof ESR measurements.
The JES-X3 Series has achieved
higher sensitivity by developing a
low-noise Gunn oscillator for its
new spectrometer.

Maximum Magnetic Field
Sweep Width
Pole Gap

X310

X320

X330

0.65 T

1.3 T

1.4 T

±0.01 to 250 mT
60 mm

Frequency Range (GHz)±0.01 to 500 mT
60 mm

75 mm

8.750 to 9.650

Field Resolution (µT)

2.35

Correction by Marker

Standard

Operating System

Windows® 10

ES-CT470

Liquid Helium Variable Temperature Controller
The ES-CT470 varies the sample temperature in the temperature range between 2.5 K and 470 K.
Temperature setting is performed by digital display and the set temperature is kept constant by automatic
control circuits. Combined use with a UV Irradiation device is possible. A GaAs element is used as atemperature sensor, enabling high-accuracy temperature setting.
● Variable temperature range: 2.5 K to 470 K● Liquid helium consumption: 0.8 to 2 L/h● Temperature stability: ±0.01 K for 2.5 K to 4.2 K● Dewar adapter: 5/8 inch

±1% or 0.5 K for 4.2 K to 470 K● Required cooling time: 20 min to 25 min from room
temperature● Power supply: 90 – 125/180 – 250 V AC

Scientific/Metrology Instruments

14

50 Hz/60 Hz● Sample tube O. D.: 5 mm

Mass Spectrometers

JMS-T2000GC MultiAnalyzer

Multi-ionization Unknown Compounds Analysis System
Materials are getting more complex, our environment is diversifying, and hundredsof new chemicals are created every day. The Multi-ionization Unknown Compounds
Analysis System MultiAnalyzer performs qualitative analysis even for unknown
compounds and provides answers to such complicated and challenging problems.
We are committed to provide high throughput, high quality analysis results with
MultiAnalyzer.

Dual stage
Reflectron TOF

MultiAnalyzer
GC column
CathodeMSE（8 〜 10 kV）● Molecule● Ion

Multi ionization

msFineAnalysis AI

JMS-Q1600GC UltraQuad™ SQ-Zeta

Gas Chromatograph - Quadrupole mass spectrometer (GC-QMS)
JMS-Q1600GC UltraQuad™ SQ-Zeta is our 6th generation high-end Gas
Chromatograph Quadrupole Mass Spectrometer (GC-QMS) based on JEOL's MS
technologies and years of in-depth experience. The IDL of the standard EI ion
source is 5 fg (OFN) or less. An Enhanced Performance Ion Source (EPIS) is alsoavailable for analysis at even higher sensitivity. Based on our highly acclaimed
msFineAnalysis software for GC-TOFMS, the new msFineAnalysis iQ expands thisintegrated qualitative analysis capability into GC-QMS data analysis and provides
GC-MS qualitative analysis results faster than before. From quantitative applications
such as environmental samples, water quality control and agrochemicals, toqualitative applications such as materials and aroma analyses, the SQ-Zeta is theultimate general-purpose GC-MS with high-performance capabilities for a wide
variety of measurement and analysis needs.

Scientific/Metrology Instruments

15

JMS-T2000GC AccuTOF™ GC-AlphaHigh Performance Gas Chromatograph - Time-of-Flight Mass Spectrometer
The JMS-T2000GC AccuTOF™ GC-Alpha is a high performance GC-MS system that simultaneously
realizes high mass resolution, high mass accuracy, high sensitivity, high speed data acquisition, wide
dynamic range, and wide mass range. Two types of multi-ionization combination ion sources - EI/FI/FD
combination ion source and EI/PI combination ion source - are available. Soft ionization methods can
produce molecular ions from unknown compounds whose molecular ions can not be produced by EI, andfacilitate the elucidation of their elemental compositions. The system comes with the automatic data
analysis software “msFineAnalysis AI” for integrated analysis of the data measured by the multi-ionization
combination ion sources, thus providing fast automatic qualitative analysis, which does not solely dependon mass specral library databases.

JMS-TQ4000GC UltraQuad™ TQ

Gas chromatograph - Triple Quadrupole mass spectrometer (GC-QMSMS)
The new GC Triple Quadrupole Mass Spectrometer that provides both high productivity and highly
sensitive analysis with the combination of JEOL's proprietary short collision cell technology and the ion
ejection technology (ejecting ions after accumulating and pulsing them). It exerts its capabilities in
microanalysis and quantitative analysis of samples containing many foreign substances such as analysis ofresidual agricultural chemicals in food. Further microanalysis is possible by using an optional ion sourcesuch as an Enhanced Performance Ion Source (EPIS).

MS-62071STRAP

Headspace Autosampler

Photo: JMS-Q1600GC + Headspace autosampler system

The MS-62071STRAP is a new-generation headspace sampler(HS) providing ultra-low concentration
measurement, which was not possible with the HS method using a conventional sample loop. In addition,
the HS-GCMS system, combined with a JMS-Q1600GC, guarantees detection of mold odor in water
down to 1 ppt.

JMS-800D UltraFOCUS™

Mass Spectrometer Dedicated to Dioxin Analysis
The JMS-800D UltraFOCUS™, conforming to international standards on dioxin analysis, including EPA,
EN, and JIS methods, focuses on analysis of ultra-trace amounts of dioxins, PCBs, PBDEs, and POPs
components. Equipped with a socket-type ion chamber, a standard sample inlet system with automatic
ON/OFF function, and a photo-multiplier detector, the JMS-800D is optimum for detecting dioxins withultrahigh sensitivity and ultrahigh selectivity.

Scientific/Metrology Instruments

16

JMS-S3000 SpiralTOF™-plus 2.0

Ultra-High Mass-Resolution MALDI-TOFMS System
The JMS-S3000 SpiralTOF™-plus 2.0 is a MALDI-TOFMS* incorporating JEOL’s proprietary SpiralTOF™
ion optical system. With superior capabilities than conventional MALDI-TOFMS, the JMS-S3000 provides
state-of-the-art analytical solutions for a wide range of research needs, including functional synthetic
polymers, materials chemistry, and biomolecules.
* Matrix-Assisted Laser Desorption/Ionization Time-of-Flight Mass Spectrometer

JMS-T100LP AccuTOF™ LC-Express

Atmospheric Pressure Ionization High-Resolution Time-of-Flight Mass Spectrometer
The JMS-T100LP AccuTOF LC series of atmospheric pressure ionization time-of-flight mass spectrometers
are robust, easy-to-maintain, high-throughput mass spectrometers intended for high productivity withmultiple ionization methods. The AccuTOF™ LC-Express is the advanced version of JMS-T100LP with asignificantly improved dynamic range. By using Direct Analysis in Real Time (DART™), which is JEOL's
proprietary ionization technology of rapidly providing accurate mass information, as well as easy
replacement of the ion source with the electrospray ionization (ESI) source for LC/MS operation or with the
ColdSpray ionization (CSI) source, the AccuTOF™ LC-Express satisfies various research needs in organic
chemistry, material science, and other fields.

JMS-T100LP + DART™ Ion Source

Ambient Ionization High-Resolution TOFMS
Direct Analysis in Real Time (DART™) is a new ion source that can analyze samples with various shapes
and states without any sample preparation. DART was born in 2003 at the mass spectrometry applications
laboratory of JEOL USA, Inc. Among a series of new ionization techniques, which were later termed“ambient ionization,” DART was the first to have been invented and the first to have been commercialized
in 2005. You can acquire high mass-resolution, accurate-mass spectra in real time by simply presenting
samples of various shapes and states to the DART™ ion source without any sample preparation. DART
can handle samples with arbitrary shapes or “dirty” sample that conventional analytical method cannot deal
with. DART™ was developed for the JEOL AccuTOF™ series of mass spectrometers. AccuTOF™
LC-Express and DART are the perfect combination.

Scientific/Metrology Instruments

17Semiconductor Equipment

JBX-3200MVS

Electron Beam Lithography System
The JBX-3200MVS series is an electron beam lithography system for mask/reticle fabrication that meetsthe design rule of 32 to 20 nm. This system features pattern writing with high speed, high accuracy andhigh reliability, achieved by high-end technology.
● High throughput enabled by a new PEC (Proximity Effect Correction) system● High-speed data-transfer system for a large quantity data
● High-precision design for mask / reticle production

JBX-9500FS

Electron Beam Lithography System
The JBX-9500FS is an Gaussian beam lithography system featuring a spot
beam, vector scan, and a step and repeat stage. Capable of varying the beam
size widely, the system is versatile in its applications from basic research ofelements to test production of optical elements to research and development
for masks for high accelerating voltage exposure.
● Accelerating voltage: 100 kV● Electron beam source: ZrO / W Schottky emitter● Substrate size: maximum 300 mm wafer

JBX-8100FS

Electron Beam Lithography System
The JBX-8100FS is a Gaussian beam lithography system that performs superior accuracy and writing
speed. Upgradable platform offers various options to meet the fields from high-end nanostructure
applications to batch production of compound semiconductor.
● Accelerating voltage: 100 kV / 50 kV / 25 kV● Electron beam source: ZrO / W Schottky emitter● Scanning speed: 125 MHz to 250 Hz● Substrate size: up to 200 mm wafer

Industrial Equipment

18

Metal AM Machine

JAM-5200EBM

Electron Beam Metal 3D PrinterMetal 3D printer that employs additive manufacturing with powder bed fusion techniques. This 3D printerirradiates the laid metal powders with an electron beam to melt and solidify the powders for fine-structure
production. The features of the printer include direct manufacturing of 3D micro-structures, andlarge-output, high-speed, high-density manufacturing, thus allowing for additive manufacturing with highquality and high reproducibility.
● Manufacturing dimensions: Maximum 250 mm (dia.) × 400 mm (H)● Electron beam output: Maximum 6 kW

Industrial Equipment
for thin-film formation and material processing
BS series / EBG series
Electron Beam Source

BS-60211DEM

BS-60060DEBS

EBG-102UB6S

EBG-203UB6SElectron beam sources for vacuum evaporation of thin-film deposition. Various models are selectable foroxide films, nitride films and metal films. Extended-use models are also available for multilayer films andcontinuous evaporation with the long-lifetime filament.

BS-60610BDS / BS-60310BDS
Bombardment Deposition Source

Deposition sources that utilize electron-beam bombardment indirect heating techniques. Suitable forlow-damage, low-defect, low-absorption film evaporation. The BS-60610BDS achieves large capacity
and high rate for liners.
BS-60610BDS

BS-60310BDS

Industrial Equipment

19

JEBG series

High-power Electron Beam Source
High-power electron beam sources for vacuum evaporation of metal and metal-oxide for wide plastic films
or large glass plates that are continuously fed. They can also be used for vacuum melting of high-melting
point metals.

JEBG-3000UBJEBG-1000UB

BS-80011BPG / BS-80020CPPS
Plasma Source

Plasma Sources are installed in a vacuum chamber and generate high-density plasma. Used for Ion Plating (Plasma
Assisted Deposition) and it is possible to improve film properties for optical thin films, protective films and functionalfilms. Because high density plasma can be generated in a mass space, high-rate deposition to a large area is possible.

BS-80011BPG

BS-80020CPPS

BS-04 series
Rotary Sensor

Multi-point sensor for measuring the deposition rate and film thickness in vacuum evaporation or sputteringby connecting it to a quartz-rate control monitor. Equipped with 6 or 12 quartz crystals, smooth crystal
replacement is achieved for deposition of multilayer or thick films. Sensor length in the chamber isselectable and two kinds of sensor-head angle are available, thus enabling flexible sensor installation into
small to large equipment.

BS series

Electron Beam Source for research and development
Electron beam source suitable for research and development. Various optional accessories can be added
for a wide range of customization, including lift-off evaporation with low temperature, low damage, low
defect, etc.

TP series

RF Induction Thermal Plasma System

TP-40020NPS
Nano-powder synthesis system

Thermal plasma around 10,000 °C by RF inductive coupling. Applications of the thermal plasma system
include nano-powder synthesis, fine-powder spheroidization, high-speed thick-film synthesis and gas
decomposition. Irrespective of materials and gases, chemical reactions (oxidization, nitriding) and surface
reforming can be made.

TP-99260FDR
Powder Feeder

The table-type powder feeder that can stably feed minute particles of various sizes ranging from submicron
to 100 μm or larger. It feeds particles using carrier gas through the piping. Even particles of a few microns
or less in size that are highly cohesive and therefore poor in fluidity can be fed continuously. The powder
feeding rate is approximately from 0.1 to 100 g/min. The closed structure enables feeding into a reducedpressure atmosphere. Not only single-composition particles but also mixed-composition particles can be
fed continuously without changing the mixing ratio. It also supports real-time monitoring of powder feeding,
feedback, and external control.
Industrial Equipment

20

Clinical Chemistry Analyzers

JCA-BM8020/8040/8060 (BioMajesty 8000 Series)
Ultra High Throughput Clinical Chemistry Analyzer

JCA-BM8000 series offers high throughput and extensive sample handling capacity with a loadingmechanism for up to 300 samples, a sample pre-dilution unit, and interconnected single-line multipletesting modules. Ready for the next generation network support system “JEOINT™”.
BioMajesty is a registered trademark of JEOL Ltd.

BioMajesty 8000GX 4B

JCA-BM6070/C

High Throughput High Performance Clinical Chemistry Analyzer
With high throughput of 2,400 T/H (including ISE) as well as new functions to support various laboratory
operation flows such as wash operations between samples, this model further streamlines clinicalchemistry testing.
Ready for the next generation network support system “JEOINT™”.

JCA-ZS050

Clinical Chemistry Analyzer BioMajesty TM Zero Series
JCA-ZS050 is equipped with a system to avoid sample-to-sample carryover, which is suitable for analyzing
a variety of samples. Its Flexible Access system and an enhanced wash mechanism (three wash modes)
successfully achieve unprecedentedly high throughput and high inspection quality. Furthermore,
JCA-ZS050 significantly reduces the time and cost of medical inspections, owing to drastic cost reduction
by ultramicro-volume measurement with the minimum 40 μL reaction volume, together with intuitive
usability and simple maintenance. These innovative features enable the establishment of new workflows ina wide range of clinical test applications.
With the optional on-board hemolysis mechanism, this model is capable of automated HbA1c
measurement. Ready for the next generation network support system “JEOINT™”.

Medical Equipment

21

JCA-BM6050

SIEMENS HEALTHCARE DIAGNOSTICS

Clinical Chemistry Analyzer BioMajesty™ Series
JEOL’s micro volume technology and unique sample pre-dilution mechanism realizes high throughput
chemistry analysis with reduced sample and reagent volume. More than 5,000 systems have been placed
in clinical laboratories all over the world.

JCA-BM6010/C

Compact & High Performance Clinical Chemistry Analyzer
JCA-BM6010/C is a compact, but efficient automatic analyzer that maintains the basic concept of the
BioMajesty™ series while achieving the excellent capability of microanalysis with sample volume as small
as 1 μL. BM6010/C also offers fully automated HbA1c analysis with on-board hemolysis. Simultaneous
measurement of Glucose and HbA1c improves laboratory workflow.

Medical Equipment22

No. 0305I383C Printed in Japan, Kp