ᚑくᄢቇℂᎿቇ⎇ⓥႎ๔
J. Fac. Sci. Tech., Seikei Univ.
Vol.45 No.2 (2008) pp.61-62
㧔․೎⎇ⓥ⾌ߦଥࠆ⺰ᢥ㧕ࠪ࡝ࠦࡦᄥ㓁㔚ᳰߩࡊ࡜࠭ࡑ࡟ࠬ࠼࡜ࠗ࠹ࠢࠬ࠹ࡖ࡯ൻࡊࡠ࠮ࠬ㥲⮮ ᵗม 㧘㐷㚍 ᱜ 㧘ᚑ↰ ᣽ᐔ 

A Study on Plasamaless Dry Texture Process for Silicon Solar Cells
Yoji SAITO , Tadashi MOMMA  Shohei NARITA ABSTRACT Reflection loss of silicon solar cells can be reduced by texturization of the surfaces. In
this study, crystalline silicon substrates were treated with chlorine trifluoride (ClF3) to create the grooveand honeycomb-textured structures. We mainly investigated optical and electrical properties of thetextured surfaces. By the treatment with ClF3 gas, the reflectance of the groove- and honeycomb-textured
surfaces were obtained to be about 17% and 21%, respectively, at the wavelengths of 600nm.The solar
cells using the textured substrates were fabricated and their performance was evaluated.
Keywords: multi-crystalline silicon, texturization, chlorine trifluoride gas(Received September 26, 2008)ၮ᧼߳ߩ࠳ࡔ࡯ࠫ㧘ૐ޿ࠬ࡞࡯ࡊ࠶࠻ߦࠃࠆࠦࠬ࠻Ⴧᄢ㧝㧚✜ ⺰ߥߤ߇ታ↪ൻߦ߅޿ߡ ᔨߐࠇࠆ‫ޕ‬ ᄥ㓁㔚ᳰߩ㜞ല₸ൻᴺߩ৻ߟߣߒߡ෻኿₸ࠍૐᷫߐߖ ᚒ‫߇ޘ‬ឭ᩺ߒߡ޿ࠆࠟࠬߣၮ᧼᧚ᢱߣߩ⚐☴ߥൻቇ෻ߡ෻኿៊ᄬࠍૐᷫߔࠆᣇᴺ߇޽ࠅ㧘ߘߩᣇᴺߣߒߡ⴫㕙ᔕߦࠃࠆࡊ࡜࠭ࡑ࡟ࠬ࠼࡜ࠗࠛ࠶࠴ࡦࠣߢߪ㧘వߕ㧘╬ࠍಳಲ᭴ㅧߣߔࠆ࠹ࠢࠬ࠴ࡖ࡯ൻߦࠃࠅᄙ㊀෻኿ࠍ⿠ߎᣇᕈࠛ࠶࠴ࡦࠣߢ޽ࠆߎߣ㧘ᰴߦ㧘ᄢ߈ߥㆬᛯᲧ߇ᦼᓙߔᣇᴺߣ෻኿㒐ᱛ⤑ߦࠃࠆᣇᴺ߇ߥߐࠇߡ޿ࠆ‫ޕ‬෻኿㒐ߢ߈  㧘ߐࠄߦᲧセ⊛◲ଢߥⵝ⟎ߢᄢ㊂ಣℂ߇น⢻ߢ޽ᱛ⤑ߪ޽ࠆ․ቯߩᵄ㐳ߦኻߒߡ෻኿₸ࠍᄢ߈ߊૐᷫߐߖࠆߣᕁࠊࠇࠆ‫ޕ‬ࠆ߇㧘⴫㕙ߩ࠹ࠢࠬ࠴ࡖ࡯ൻߪ⍴ᵄ㐳߆ࠄ㐳ᵄ㐳ߦࠊߚ ᧄ⎇ⓥߢߪ㧘ࡄ࠲࡯࠾ࡦࠣࠍⴕߞߚ㉄ൻ⤑ࡑࠬࠢࠍ↪

ࠅో૕⊛ߦ෻኿₸ࠍૐᷫߐߖࠆ․ᓽ߇޽ࠆ‫ޕ‬޿ߡ㧘ਃࡈ࠶ൻႮ⚛ࠟࠬࠍ↪޿ߡࠛ࠶࠴ࡦࠣࠍⴕ޿㧘5K

 න⚿᥏ࠪ࡝ࠦࡦᄥ㓁㔚ᳰߩ࠹ࠢࠬ࠴ࡖ࡯ൻߪ㧘KOH߿ၮ᧼⴫㕙ߦඨ⃿⁁ߩ┄ߺࠍਗߴߚࡂ࠾ࠞࡓ⁁࠹ࠢࠬ࠴ࡖ

NaOH╬ߩࠕ࡞ࠞ࡝ᕈṁᶧࠍ↪޿㧘⚿᥏ᣇะߩࠛ࠶࠴ࡦ࡯᭴ㅧ 㧘߹ߚߪ㧘ࠃࠅ૞⵾ߩኈᤃߥࠣ࡞࡯ࡉ⁁࠹ࠢࠬࠣ࡟࡯࠻Ꮕࠍ೑↪ߒߚ⇣ᣇᕈࠛ࠶࠴ࡦࠣߦࠃߞߡ㧘࠙ࠚ࠴ࡖ࡯᭴ㅧߩ૞⵾ࠍ⹜ߺߚ‫ޕ‬శቇ⊛․ᕈߣߒߡਥߦⓍಽࡂ⴫㕙ߦ࡜ࡦ࠳ࡓߥࡇ࡜ࡒ࠶࠼᭴ㅧࠍᒻᚑߢ߈ࠆ‫ߚ߹ޕ‬㧘⃿ࠍ↪޿ߚ෻኿₸᷹ቯࠍⴕߞߚ‫ߦࠄߐޕ‬㧘ߎߩၮ᧼ࠍ↪

ࡄ࠲࡯࠾ࡦࠣߒߚࡑࠬࠢࠍ↪޿ࠇ߫㧘ㅒࡇ࡜ࡒ࠶࠼᭴ㅧ޿ߡᄥ㓁㔚ᳰࠍ૞⵾ߒ㧘⊒㔚․ᕈߩ⹏ଔࠍⴕߞߚ‫ޕ‬߿VሼḴߥߤߩ᭴ㅧ߇ᒻᚑߢ߈ࠆ‫ߒ߆ߒޕ‬㧘⃻࿷㔚ജ↪

ߣߒߡᄙߊ↢↥ߐࠇߡ޿ࠆᄙ⚿᥏ࠪ࡝ࠦࡦᄥ㓁㔚ᳰߢߪ㧞㧚ታ㛎ᣇᴺ⚿᥏ᣇ૏߇ਇⷙೣߢ޽ࠆߚ߼㧘ߎࠇࠄߩᛛⴚߪലᨐ⊛ߢߪߥ޿‫৻ޕ‬ᣇ㧘RIEࠍ↪޿ߚ࠹ࠢࠬ࠴ࡖ࡯ൻߩ⹜ߺ߽ߥ వߕ㧔㧕ᣇ૏㧘RဳǡEOߩන⚿᥏5K਄ߦ͠㉄⚛

ߐࠇߡ޿ࠆ ‫ߩߎޕ‬႐วߪᄙ⚿᥏ߩ႐ว߽ㆡ↪น⢻ߢ޽ਛߢᾲ㉄ൻ⤑ࠍᒻᚑߒߚ‫⋥ޕ‬ᓘǴO⒟ᐲߩዊሹࠍ㑆㓒ࠆ߇㧘ࡊ࡜࠭ࡑ᧦ઙߩ⸳ቯ߇㔍ߒ޿ߎߣ㧘ࠗࠝࡦߦࠃࠆǴOߢᒻᚑߒ㧘ࡑࠬࠢߣߒߚ‫ోޕ‬࿶㨗2C㧘%N(ࠟࠬಽ࿶㨗2C㧘ቶ᷷ߦ߅޿ߡ࠼࡜ࠗࠛ࠶࠴ࡦࠣಣℂߒ㧘ࡂ࠾

*1*2*3ᚑくᄢቇℂᎿቇㇱࠛ࡟ࠢ࠻ࡠࡔࠞ࠾ࠢࠬቇ⑼ᢎ᝼
yoji@st.seikei.ac.jp㧘Professor,
Department of Mechanical and Electrical EngineeringᚑくᄢቇℂᎿቇㇱࠛ࡟ࠢ࠻ࡠࡔࠞ࠾ࠢࠬቇ⑼ഥᚻ
ᚑくᄢቇᄢቇ㒮Ꮏቇ⎇ⓥ⑼㔚᳇㔚ሶᎿቇኾ᡹

ࠞࡓ᭴ㅧ߹ߚߪࠣ࡞࡯ࡉ᭴ㅧߩᒻᚑࠍⴕߞߚ‫ޕ‬ࡂ࠾ࠞࡓ࠹ࠢࠬ࠴ࡖ࡯ൻන⚿᥏ၮ᧼⴫㕙ߦ࡝ࡦࠍᾲ᜛ᢔߒߡRPធวࠍᒻᚑߒ㧘ߐࠄߦ㧘⴫㕙ߦᰏ⁁#N㔚ᭂ㧘ⵣ㧙㧙ߩ․ᕈ߽Ყセߣߒߡ␜ߒߚ‫ߩߎޕ‬࿑ߦ߅޿ߡ㧘࠹ࠢࠬ࠴㕙ో㕙ߦ#N㔚ᭂࠍᒻᚑߒߡ㧘ᄥ㓁㔚ᳰࠍ૞⵾ߒߚ‫ޕ‬ࡖ࡯ൻߦࠃࠅ⍴⛊㔚ᵹ߇ 㧑⒟ᐲჇടߒ㧘ᦨᄢ㔚ജ߽ห㧟㧚ታ㛎⚿ᨐ߅ࠃ߮ᬌ⸛⒟ᐲჇടߒߡ޿ࠆߎߣ߇ࠊ߆ࠆ‫ޕ‬ᓥߞߡ㧘޿ߕࠇߩ࠹ࠢ

ࠬ࠴ࡖ࡯ൻߦ߅޿ߡ߽⊒㔚․ᕈᡷༀലᨐ߇⏕⹺ߢ߈ߚ‫ޕ‬ ࠼࡜ࠗࠛ࠶࠴ࡦࠣಣℂߦࠃࠅ㧘ࡂ࠾ࠞࡓ᭴ㅧ߹ߚߪࠣ㐿᡼㔚࿶ߩૐਅ߇⷗ࠄࠇߥ޿ߎߣ߆ࠄ㧘࠹ࠢࠬ࠴ࡖ࡯ൻ

࡞࡯ࡉ᭴ㅧߩᒻᚑࠍⴕߞߚᓟ㧘㉄ൻ⤑ࡑࠬࠢࠍ㒰෰ߒߚߦࠃࠆᩰሶᰳ㒱ߩ⊒↢߇ߥ޿ߎߣ߽⏕⹺ߢ߈ߚ‫ޕ‬෻኿₸ၮ᧼⴫㕙ߩ⿛ᩏ㔚ሶ㗼ᓸ㏜㧔SEM㧕௝ࠍ࿑ 1 ߦߘࠇߙࠇૐᷫߦ߅޿ߡߪ㧘ࠛ࠶࠴ࡦࠣ㕙߇Ṗࠄ߆ߥ႐ว㧘ℂ⺰⊛␜ߔ‫ࡓࠞ࠾ࡂޕ‬᭴ㅧߦ߅޿ߡߪඨ⃿⁁ߩ┄ߺ߇ᒻᚑߢ߈ߦߪࠣ࡞࡯ࡉ᭴ㅧߩᣇ߇ਇ೑ߢ޽ࠆ߇㧘㔚᳇⊛․ᕈߦ߅ߡ޿ࠆ߇㧘㏜㕙ㇱಽ߇৻ㇱᱷߞߡ޿ࠆߎߣ߇ࠊ߆ࠆ‫৻ޕ‬޿ߡߪᏅ߇޽߹ࠅή߆ߞߚ‫ߩߎޕ‬ℂ↱ߣߒߡ㧘ࠛ࠶࠴ࡦᣇ㧘ࠣ࡞࡯ࡉ᭴ㅧߩᣇߢߪ㧘U ሼḴ߇ᒻᚑߐࠇߡ޿ࠆߎࠣ㕙ߩ⚦߆޿ಳಲߦࠃࠅੂ෻኿߇⿠߈㧘ਔ᭴ㅧ㑆ߩᄙ㊀ߣ߇ࠊ߆ࠆ‫ޕ‬෻኿ߩ઀ᣇߩᏅ߇޽߹ࠅή޿ߎߣ㧘᭴ㅧ߇න⚐ߥᣇ߇㧘㔚ᵹ⚻〝ࠍ⍴ߊ಴᧪ࠆߎߣߥߤ߇⠨߃ࠄࠇࠆ‫ޕ‬㪋㪇㪉㪚㫌㫉㫉㪼㫅㫋㩷㪻㪼㫅㫊㫀㫋㫐㩷㪲㫄㪘㪆㪺㫄 㪴㪊㪇 㪉㪇    ࡂ࠾ࠞࡓ⁁        ࠣ࡞࡯ࡉ⁁ ࿑  ࠹ࠢࠬ࠴ࡖ࡯ၮ᧼ߩ 5'/ ௝㪟㫆㫅㪼㫐㪺㫆㫄㪹㪄㫋㪼㫏㫋㫌㫉㪼㪻㪞㫉㫆㫆㫍㪼㪄㫋㪼㫏㫋㫌㫉㪼㪻㪤㫀㫉㫉㫆㫉㩷㫊㫌㫉㪽㪸㪺㪼 㪈㪇 㪇㪩㪼㪽㫃㪼㪺㫋㪸㫅㪺㪼㩷㪲䋦㪴㪈㪇㪇㪐㪇㪏㪇㪤㫀㫉㫉㫆㫉㩷㫊㫌㫉㪽㪸㪺㪼㪞㫉㫆㫆㫍㪼㪄㫋㪼㫏㫋㫌㫉㪼㪻㪟㫆㫅㪼㫐㪺㫆㫄㪹㪄㫋㪼㫏㫋㫌㫉㪼㪻㪎㪇㪍㪇㪇㪇㪅㪈㪇㪅㪉㪇㪅㪊㪇㪅㪋㪭㫆㫃㫋㪸㪾㪼㩷㪲㪭㪴㪇㪅㪌㪇㪅㪍࿑㧟 ૞⵾ߒߚᄥ㓁㔚ᳰߩ #/ శᾖ኿ᤨߦ߅ߌࠆ   㔚ᵹ㔚࿶࡮㔚ജ㔚࿶․ᕈ㪌㪇㪋㪇㪊㪇㧠㧚⚿ ⺰㪉㪇㪈㪇㪇㪊㪇㪇 න⚿᥏ࠪ࡝ࠦࡦߦኻߒߡࡊ࡜࠭ࡑ࡟ࠬ࠼࡜ࠗࠛ࠶࠴ࡦࠣߦࠃࠆࡂ࠾ࠞࡓ⁁߅ࠃ߮ࠣ࡞࡯ࡉ⁁࠹ࠢࠬ࠴ࡖ࡯ൻࠍ㪋㪇㪇㪌㪇㪇㪍㪇㪇㪎㪇㪇㪮㪸㫍㪼㫃㪼㫅㪾㫋㪿㩷㪲㫅㫄㪴㪏㪇㪇㪐㪇㪇ⴕߞߚ‫⚿ߩߘޕ‬ᨐ㧘นⷞశ㗔ၞߦ߅޿ߡ෻኿₸ߪඨಽ⒟ᐲߣߥߞߚ‫࡯ࡖ࠴ࠬࠢ࠹ߩߎޕ‬ൻၮ᧼ࠍ↪޿ߡᄥ㓁㔚ᳰ࿑  ࠹ࠢࠬ࠴ࡖ࡯ၮ᧼ߩ෻኿ࠬࡍࠢ࠻࡞ࠍ૞⵾ߒ㧘⹏ଔߒߚߣߎࠈ㧘޿ߕࠇߩ᭴ㅧߦ߅޿ߡ߽⊒㔚ല₸߇㧟ഀ⒟ᐲะ਄ߢ߈ࠆߎߣࠍ⏕⹺ߒߚ‫ޕ‬ ߎࠇࠄߩ⴫㕙ߩ෻኿ࠬࡍࠢ࠻࡞ࠍ᷹ቯߔࠆߣ㧘࿑  ߦ␜ߔࠃ߁ߦ㧘޿ߕࠇߩ᭴ㅧߦ߅޿ߡ߽ PO ߦ߅޿ߡෳ⠨ᢥ₂㧑⒟ᐲߩ෻኿₸ߣߥࠅ㧘ᧂಣℂ㏜㕙ၮ᧼ߩඨಽ⒟ᐲߩ
෻኿₸ߣߥߞߚ‫ޕ‬න⚐ߦ⸘▚ߔࠆߣ⚂  ୚ߩశࠍๆ෼

1) O.Shultz, G.Emanuel, S.W.Glunz, G.P.Willeke, Proc. The
3rd World Conf. on Photovoltaic Solar Energyߔࠆߎߣߦߥࠆ‫ޕ‬

Conversion, p.1360 (2003) ࡂ࠾ࠞࡓ⁁࠹ࠢࠬ࠴ࡖ࡯ൻන⚿᥏ၮ᧼⴫㕙ߦ࡝ࡦࠍᾲ
᜛ᢔߒߡ RP ធวࠍᒻᚑߒ㧘ߐࠄߦ㧘⴫㕙ߦᰏ⁁ #N 㔚ᭂ㧘ⵣ㕙ో㕙ߦ #㧝㔚ᭂࠍᒻᚑߒߡ㧘ᄥ㓁㔚ᳰࠍ૞⵾ߒߚ‫ޕ‬2) Y.Saito, Sensors and Materials 16, p.191 (2004)

3) Y. Saito and T. Kosuge, Solar Energy Materials and SolarCells vol. 91, p.1800 (2007)#/ ⋧ᒰ O9EO ߩశᾖ኿ߦ߅ߌࠆ⊒㔚․ᕈࠍ࿑ ߦ␜ߔ‫࡯ࡖ࠴ࠬࠢ࠹ޕ‬ൻࠍⴕߞߡ޿ߥ޿㏜㕙ߩᄥ㓁㔚ᳰ㧙㧙