【 O p e r a t i o n
MFC

power

M a n u a l 】

supplymeter

ＭＯＤＥＬ：ＳＰ－８３３Ａ
Thank you for purchasing this UINICS product.
Please read this Operation Manual carefully in order to ensure thatyou use the power supply safely and correctly.

!

CautionFor professional use only or designed for use by a licensed electrician only.

!

Attention
Check if the label (model name) of the unit and your desired productspecification correspond before use.

Head Office／

Technical

TEL：+81-72-274-6001

inquiry
FAX：+81-72-274-6005

123-1, Kami, Nishi-Ku, Sakai-shi, Osaka, 593-8311 JapanTokyo Office
TEL：+81-3-5256-8311

FAX：+81-3-5256-8312

URL: https://www.uinics.co.jp
Scan the QR code to access the website.

Please note that the communication costs shall be borne by the customer.

※All specifications may be changed without notice.

【 The 9th edition １ Apr. 2024 】
＠ＳＰ－８３３Ａ（９）－Ｅ

Precautions
Please read this operation manual including the following precautions carefully toensure safe use of your meter.

Warning・・・The following cases that may cause death or serious injury.
１．Do not wire while power is supplied. There is a risk of electric shock and fire.
２．Do not touch the terminals while power is supplied. There is a risk of electric shock.
３．Do not disassemble or touch the inside of the product.
There is a risk of electric shock and fire.
４．Do not use the product in places with flammable gas or ignitable substances.
５．Prepare the emergency stop or build a fail-safe system, etc. for when aproduct is break down or abnormality operating.

Caution・・・That may cause Minor injury or Property damage.
１．Use the product at the rated range power supply voltage and load.
２．Do not use the product at the following environment.
・Where there is exposed to metal powder, dust, water, chemicals, oil, etc.
・Where there is corrosive gas.
・Outdoors or in direct sunshine.
・Where condensation occurs.
・Temperature and humidity outside the rated range.
・Where there is vibration or impact.
３．Do not let metal powder, dust, water, chemicals or oil into the product.
There is a risk of break down or fire.
４．Check periodically for defects and abnormalities.
５．If the product is break down, firing, emitting smoke, overheating, abnormal noise,
etc. turn off the power immediately and stop using it.
６．Do not place the product and wiring near noise sources.
７．If there is a possibility of invasion the lightning surges, install countermeasure parts
such as a lightning arrestor in outside.
８．It can be used almost at the same time as the power is turned on,
but requires 30 minutes of power to meet all performance requirements.
９．When cleaning, wipe with a dry cloth. Do not use organic solvents such as
benzine, thinner and alcohol.
１０．Use devices connected to each terminal of the terminal block,that is properly isolated from dangerous live parts.
１１．Since this machine has no power-on switch, it will be in an operating state
Immediatelyafter power supply impression.
On the side of your equipment that you equip the machine with, please be
prepared to supply the switch and circuit breaker which adapted to
IEC/EN60947-2 or IEC/EN60947-3 standard in the position that you canoperate immediately in emergency.
Moreover, please specify that they are interrupting devices.
１２．This machine is designed to be used with the panel mounted.
Otherwise, the protection provided by the device may be impaired.
１３．Use power code with the temperature rating 72 ℃ or more.

Contents
１．About confirmation of an attachment. and a guaranteed period ······

１

２．Introduction ····························

２

３．Specifications ···························

３～４

４．Meter mount method ························

５

５．Connection method ························

６～７

６．Internal wiring diagram ·······················

８

７．Input circuit and output circuit ···················

９

８．Front ( Name and function ) ···················· １０～１２
９．Setting menu··························· １３～１４

１０．Initial setting values and initialization ················ １５
１１．Content and setting the each mode
≪１．Operating method (the mode setting)≫ ············ １６≪２．Content of the each mode and set value≫ ·········· １７～２２Mode 1「Ratemeter：Setting of the maximum the indication value」 ··· １７Mode 2「Ratemeter：Setting of the least significant digit」 ········ １８Mode 3「Ratemeter／Totalizer：Setting of the LOW cut-off rate」 ···· １８Mode 4「Ratemeter／Totalizer：Setting of measurement indication」 ··· １９Mode 5「Totalizer：Setting of the maximum total per an hour(scaling data)」 ··· １９Mode 6「Totalizer：Ａ setup of reset time, a decimal point position,
and a synchronization pulse output.」 ····· ２０Mode 7「ＯＵＴ１,２：Preset output (open collector output)」 ····· ２１～２２
１２．Mode protect function ······················· ２２
１３．Offset value setting ························ ２３
１４．Preset value setup (Preset Output) ················· ２４
１５．Analog input adjustment ······················ ２５～２６
１６．External dimensions ························ ２７１７．Noise countermeasure ······················· ２８
１８．Troubleshooting ·························· ２９

１．About confirmation of an attachment and a guaranteed period

About confirmation of an attachment．
When you received as a product, please confirm whether it includes the following.
（１）ＳＰ－８３３Ａ ····························· １（２）ＳＰ－８３３Ａ Operation manual （This book） ··········· １（３）Mounting bracket ····························1（４）Flange nut ·······························2（５）The 3-pin terminal block cover ···················· １（６）The 10-pin terminal block cover（with 2 mounting screws） ····· １（７）Unit label ······························· １NOTE（３）and（４）are installed in the main body.
If there are the mistaking parts and the missing parts, please inform a dealer or us.
（There is a case that you don't attach by convenience.）

About a guaranteed period and a guaranteed area
１．Guaranteed period
The period a product guarantees is ４ years from a delivered day.
２．Guaranteed area
If we trouble by responsibility in whole guaranteed period, it's repaired withoutcharge at our factory. But if a product conflicted in the following matter,
it isn't a guarantee target. Please understand.
① Case of outside of the product specifications.
② Case of User-conducted alterations and modifications of the unit.
③ Case of besides our responsibility.
④ Case of safekeeping and transportation beyond the product specification condition.
⑤ Case due to natural disaster and accident.
-1-２．Introduction
This product can operate and use the mass flow controller (Hereafter referred to as MFC)
with one.
This product is integration of the power supply, the adjustment machine, and the display for
MFC. A power supply and a necessary signal can be sent and received only by connecting
this power supply with the D-SUB cable.
The flow rate set value of Ratemeter and Totalizer can be switched and displayed.
The ±15V power supply of AC 100-240V input type was stored in DIN size 48 × 96mm.
There were set machine, a valve open and close switch, and a display inthe front side, and it made it to an easy-to-use layout.
Mass flow Power can be used in the range below the rated
・±１５Ｖ Each２５０ｍＡ
・＋１５Ｖ １５０ｍＡ、－１５Ｖ ３５０ｍＡ（Does not correspond ＋１５Ｖ ３５０ｍＡ、－１５Ｖ １５０ｍＡ）

NOTE
The output of the signal of the VOR (valve open and close switch) of this power supply is
a voltage impression method. It is not possible to use it with MFC of a point of contact
terminal short method.
Valve open or close signal is output by switching the VOR switch of the front.
・The open signal of +15V is output on the open side.
・The close signal of -15V is output on the close side.

-2-

３．Specifications【 Standard specifications 】
Itemmeasurement
contents
Measu
rementDisplay

Rate
Meter

Operation system

Ratemeter／Totalizer
A/D conversion operation Resolution : About 1/7000（To full scale input）
Input measurement interval : Approx 20 ms

Low cut-off

Inputs within 0-29 %（selectable）of the maximum analog input are cut off.

Display

Red LED：5 digits Character height：8mm

Indication
changeThe Indication of Ratemeter／Totalizer is changed by ▲（It is necessary to set the mode №4）※DISP switch is an outside.

RA Lamp“RA”LED (RED) lights while displaying MFC flow rate.

TO Lamp“TO”LED (RED) lights while displaying MFC flow total value.

OV Lamp

When indication overflowed,“OV”LED (RED) lights.（When is a right shift display, it blinks.）

OUT1 Lamp“OUT1”LED lights while outputting Preset output OUT1.

OUT2 Lamp“OUT2”LED lights while outputting Preset output OUT２.

Measurement accuracy±０.3％±１digit for analog input（２３℃）

Scaling

Setting the indication value in the maximum analog input （selectable） Range：0.001-9999

Indication area

０－９９９９（When indication overflowed, ｢9999｣ flashes on and off.）

Decimal point

Setting of the maximum indicated value. （Mode №１）

Sampling time

Rate reading averaged by 0.5 sec.（fixation）

Least significant digit

Real, fixed at 0, or 0/5 （selectable）

Measurement
accuracy±０.3％±１digit for analog input（２３℃）

Scaling

Setting the maximum total per an hour

Indication area

０-９９９９９Decimal point

Displays 1 to 4 decimal points. （selectable）
If it becomes more than "99999",
it will shift to the right automatically.
During right shift indication, OV lamp flashes on and off.
During right shift indication, it becomes more than "99999",
OV lamp will light up.

Totalizer

Overflowindication

Input

Specifications

OffsetOffset value setting can establish the indication value after a reset atthe reach of 0-99999. （selectable）

MFC Flow signal（The output signal
from the MFC.）

ＤＣ ０－５Ｖ Ｄ－ｓｕb （Input impedance ３３０ＫΩ）

External
ＤＣ ０－５Ｖ Terminal block （Input impedance ３３０ＫΩ）
command input
ＶＯＲ ＩＮVOR can be operated from the outside.
It will be set to OPEN if the terminal box No. 5 and No. 7 are short-circuited.
It will be set to CLOSE if the terminal box No. 6 and No. 7 are short-circuited.

-3-

Mechanism dial
(CMDSET)

Mechanism dial with 10 turn function.
Minimum value of the scale is 1/50 of 1 turn.
Lock lever (Turn and scale are fixed.)
Scale of dial is a standard of amount of turn.

Command setting
Potentiometer(CMDSET)

MFC can be set to an arbitrary flowing quantity value.
(When it is finished to turn to the right, 5V are output.)

Operation VOR switch

Command switch(COMMAND)

SET：Flowing quantity setting value(command) is displayed.
OUT：Flowing quantity output value is displayed from MFC.
OUT：MFC Flow value、MFC Integrated value Display

Operation
setting switch

ＭＯＤＥ、 、▲ 、ＲＳＴ Each key switch

COMMAND OUT
External signal output
Valve open /close output▼

Display switch(DISP)

MFC power supply
OutputSwitches
CONT ：（Usually）
OPEN ：+15V Impressoon to VOR output. (Option +24V)
CLOSE：-15V Impressoon to VOR output. (Option P.S.common)
EXT：Let an external setpoint signal be a flow rate set value
INT：Let a setup of a CMDSET dial (CMD) be a flow rate set value.

ＤＣ±１５Ｖ Each２５０ｍＡ or
ＤＣ＋１５Ｖ １５０ｍＡ 、ＤＣ－１５Ｖ ３５０ｍＡ
Ripple and Noise：30mV or lessＤＣ０－５Ｖ ５ｍＡ Ｄ－ｓｕｂ
ＤＣ０－５Ｖ Terminal block
ＶＯＲ ＯＰＥＮ
ＤＣ＋１５Ｖ
ＶＯＲ ＣＬＯＳＥ ＤＣ－１５Ｖ

Terminal number
Comparison
Presetting method
outputOutput mode・Termina１１－１２（ＯＵＴ１）、１３－１２（ＯＵＴ２）（Sharing common）

synchroniz Preset value setting
ation pulse
Output judgment

The Presetting program mode setting is also selectable.

Comparison or Synchronization pulse（ＯＵＴ１：selectable）
Judgment output is compared with the indication value by preset value.

Output circuit

Two-points NPN open collector output. Maximum rating：DC30V 50mA

Data backup

Each mode preset value and an addition measurement value are written in FRAM.

Mode protectfunction

Change by mode protect function setting
It's possible to change it by 「OFF」 setting.
It's impossible to change it by 「ON」 setting.

Warm up time
AC input

OthersUpper limit・Lower limit（selectable）

emperature/humidity conditions
Dimensions/ weight
Color

After turning on the power, more than 30 minutes.
AC100-240V （-15％ / +10％） 270mA max 50／60Hz
About 35 or less VA
０～５０℃ ３０～８０％ＲＨ（Non-condensing）
Ｗ９６×Ｈ４８×Ｄ１５６ｍｍ Approx 400ｇ
Black

Material of the case ＡＢＳ
usage
Indoor use
environment;
Up to an altitude of 2,000m
operating
Overvoltage CategoryⅡ Pollution Degree ２
environment
Low Voltage Directive EN 61010-1
EN61326-1
EMC
EN55011(Group1 ClassA)、EN61000-4-2、EN61000-4-3、
EN61000-4-4、EN61000-4-5、EN61000-4-6、EN61000-4-11-4-

4．Meter mount method
How to mount meter
１．

Please insert this Meter in the hole which
carried out the panel cut from a front.
Panel cut size
+0.8

45 -0

+0.5

92 -0

Fig.1

（Unit：mm）
２．

Flange nut×2

Tighten with the flange nut (Two places)
while suppressing it from the back withthe mounting bracket.

Fig.2
Mounting bracket

・Fit the body on to a panel 1.0 - 4.0 mm in thickness.

（Unit：mm）-5-５．Connection method＜Terminal label＞

Ｆｕｎｃｔｉｏｎ

Ｎｏ.
①
②
③

Fig.3

D-SUB 15pin
Mounting bracket
Flange nut (M4)

For MFC (HEX-NUT. M2.6）
Body is fixed at the mount..
Bracket is fixed. (Tightening torque 0.6-0.7N/m)
Earth (Flame ground)

④

⑤

AC
AC
N.C.
OPEN
CLOSE
VOR INEXT COMMAND IN
EXT SIG OUTCOMMAND COMMONOUTPUT COMMON
OUT1 OUTPUTOUTPUT COMMON
OUT2 OUTPUT

AC power supply (AC100-240V 50-60Hz)
AC power supply (AC100-240V 50-60Hz)
Do not connect
Valve open is operated from external
Valve close is operated from external
Valve open/close signal is input from external.
Command seting signal is input from external.
MFC flowing quantity signal is output external.
Connects with common.

Preset output1 or Synchronization pulse (Collector)
Preset output1 and 2 common (Emitter)
Preset output2 (Collector)-6-

＜Ｄ－Ｓｕｂ １５Ｐｉｎ＞

Fig.４

Pin No.

Ｆｕｎｃｔｉｏｎ

１＋１５ＶＤＣ ＰＯＷＥＲ ＯＵＴＰＵＴ

２

ＮＣ

３

ＮＣ

４

ＮＣ

５

０－５Ｖ ＣＯＭＭＡＮＤ ＯＵＴ

６ＣＯＭＭＡＮＤ ＣＯＭＭＯＮ

７

ＶＯＲ

８

ＳＩＧＮＡＬ ＩＮＰＵＴ ＣＯＭＭＯＮ

９

ＥＸＴ ＶＡＬＶＥ ＣＯＭＭＯＮ

１０

０－５ＶＳＩＧＮＡＬ ＩＮＰＵＴ

１１

ＮＣ

１２

Ｐ．Ｓ．ＣＯＭＭＯＮ

１３＋１５ＶＤＣ ＰＯＷＥＲ ＯＵＴＰＵＴ

１４－１５ＶＤＣ ＰＯＷＥＲ ＯＵＴＰＵＴ

１５

ＮＣ

-7-

POT

INT

EXT

1kΩ

CW

1 2 3 4 5 6 7 8 9 10
F.GND

Terminal Block+5V REF

-15V

+15V

COM1

AC100
-240V

OUT1 OUTPUT 11

N.C

OUT1,2 OUTPUT COMMON 12
OUT2 OUTPUT 13

+5V
F.GND

OPEN

OUTPUT COM2

CLOSE

Terminal BlockＳＶ

ＰＶ

VOR IN

POWER

DISP

PV

ＳＶ

EXT COMMAND INCPU

EXT SIG OUT

-8-

CMD

CONT

CLOSE

COMMAND COMMONOUTPUT COMMON

DISP

OPEN

VOR

1 +15V POWER OUTPUT
2 NC
3 NC
4 NC
5 0-5V COMMAND OUTPUT
6 COMMAND COMMON
7 VOR
8 SIGNAL INPUT COMMON
9 EXT VALVE COMMON
10 0-5V SIGNAL INPUT
11 NC
12 P.S. COMMON
13 +15VDC POWER OUTPUT
14 -15VDC POWER OUTPUT
15 NC

D-Sub （15P）６．Internal wiring diagram
Fig.5

７．Input circuit and output circuit

１．Input signal（ＭＦＣ Flow signal, external setting signal.）

Fig.６

220ｋΩ
220ｋΩ
-

1MΩ

220ｋΩ

Internal logic
+

220ｋΩ

GND

GND

２．ＣＭＤＳＥＴ output（0-5V Voltage output）

Fig.７
5V

D-SUB 15Pin
5

INT

Terminal block
8

EXT

CMDSET
1kΩ

３．Preset output（NPN Open collector）

GND

Fig.８

11
Internal logic
1213Internal logic-9-８． Front ( Name and function )Fig.９①RA lamp（Red）
Measurement state：It lights while displaying MFC flow rate.
Setting state：It turns it off.
②TO lamp（Red）
Measurement state：It lights while displaying MFC flow total value.
Setting state：It turns it off.
③、④Alarm OUT LED（Red）
Measurement state：The lamp is activated when an alarm（OUT1,OUT2）isoutputted.
Setting state：The presetting output LED lights up at the time of thepresetting output value setting.
⑤OV [over] indicator LED（Red）
When the MFC flowing quantity value, the integrated value, and the flowing
quantity setting value exceed it, it lights.
When the MFC totalizer value is a right shift display, it blinks.

- 10 -

⑥Display（7segmentLED , 5figures）
Measurement state：A measured value is indicated.
Setting state：Mode № is indicated and the present set value is indicated.
：Whole pre-set value setting indicates the present set value.
：Whole offset value setting indicates the offset value.
：It indicates “L-oFF” and “L-on” at the time of mode protectfunction setting.
：the present bit value are indicated at the time of analog input
adjustments mode setting.
⑦VOR switch（Valve Override switch）
ＣＯＮＴ（Center） ：VOR signal to MFC becomes floating. External VOR signal
becomes effective.
ＯＰＥＮ（Left）：The VOR signal to MFC becomes +15V, and it becomes acompulsion valve opening. External VOR signal becomes
invalid.
ＣＬＯＳＥ（Right） ：The VOR signal to MFC becomes -15V, and it becomes acompulsion valve close. External VOR signal becomes invalid.
⑧MODE key

（ MODE：When a power supply is supplied while ispushing down MODE ，a test mode functions.
（A stop of the test mode function is power supply off.）▼

Turning on the
power state

and the notation）

Measurement state：Whenis pressing for 2 sec or more，while is pushingdown MODE , mode setting is called.
：When MODE is pressing for 2 sec or more, pre-set value is called.
：When ▲ is pressing for 2 sec or more，while is pushing down
MODE , offset value setting is called.
Setting state：Mode No. (indicator A) is switched.
（1→2→3・・・７→１→２→３

Rise）：OUT1,2 is switched at the time of pre-set value setting.

Measurement
Stateand the notation）：

Setting state：▼is used to call the mode protect function,or used to change it.
（It's on for more than 2 seconds.
→The state indicates it. →It's on
for more than 8 seconds just as it is. →Change）《L-oFF ⇔ L-on》▼：

is used to call the mode setting.
（It's on for more than 2 seconds with MODE.）▼⑨SHIFT key（▼

：A-d is switched at the time of analog input adjustments modesetting.

moves the flash figure when each setting, to the right- 11 -

⑩UP key（▲

and the notation）

Turning on the
power state： When a power supply is supplied while is
Pushing ▲, analog input adjustments mode setting.
（A stop of the analog input and analog output
adjustments mode setting is power supply off.）

Measurement state：▲ is used to call the offset value setting.
（ It's on for more than 2 seconds with MODE ）：▲ is used to switch the MFC ratemeter／MFC totalizer.
（ " Mode No.4" in setting is needed.）
Setting state：▲ changes the flash figure when each setting.
：While ▲ is being pressed, can confirm the registered bit
value at an adjusting analog input .

⑪RESET key（ ＲＳＴTurning on the
power state.

and the notation）：Throw power supply in with RST pressed toinitialize the settings.

Measurement state：Resets the totalizer without interrupting or resetting
the rate reading. It also resets the presetting output.
Setting state：RST is used to register and make it measurement status.
：The bit value of “A～d” is registered at the time ofanalog output adjustment mode setting.

⑫COMMAND switch
ＥＸＴside：Let an external setpoint signal be a flow rate set value.
ＩＮＴside：Let a setup of a CMDSET dial (CMD) be a flow rate set value.
⑬DISP switch
ＳＥＴside：A flow rate set value is displayed.
ＯＵＴside：MFC flow rate value , MFC totalizer valuee

are displayed..

⑭CMDSET dial
Potentiometers for command adjustment. Flowing quantity setting signal can be fine-tuned by 10
turn function.

- 12 -

９．Setting menu
≪Test mode≫

Power supply OFF
Test mode

Turn power supply on with
MODE being pressed.

Turn the power off
to exit from this mode.
The soft ver.
MODE

LED
All leds lighting up.

MODE mode key
shift key
RST

up keyreset key

MODE
Only decimal points are lighing up.
MODE
Indication test
MODE
Key switch test,Output test.
MODE

RST
ＯＵＴ２
▲
ＯＵＴ１
DISP key (SET:0,OUT:1)
MFC Flow signal : analog input.

MODE
MFC flowing quantity value : analog input.
MODE- 13 -

≪Setting menu≫
Power supply OFF
Turn power supply on
with RST being pressed.

Initialization＜Adjusting the analog input＞

Turn power
supply on.

Measurement state

Turn power supply on withbeing pressed.
A. F F F F The minimum bit values for ＭＦＣ flow signal
b. F F F F The maximum bit values for ＭＦＣ flow signal

MODE
MODE

The setting value of each mode
are initialized.

C. F F F F The minimum bit values for External setting signal
d. F F F F The maximum bit values for External setting signal

MODE
MODE

Power supply OFF

Each adjusted value isregistered with RST.

MODE Mode Key
Shift Key＜The mode protect function＞

Up KeyRST

Press for 2 sec. or more keps. pressing

Reset KeyL _ o F F

for 8sec. as it is continuously.

The mode protect function OFF⇔

L _ o nThe mode protect function ＯＮ＜The offset value setting＞
MODE + Press

2sec.or.more.

0 0 0 0 0

The offset value

Registered by RST＜The preest value setting＞
Press MODE for 2sec. or more.
MODE

9 9 9 9 9The preset value setting : OUT1

9 9 9 9 9The preset value setting : OUT2

MODE
Registered by RST＜The mode setting＞
MODE + Press
MODE
MODE
MODE
MODE
MODE
MODE

for 2sec. or more

1. 1 0 0. 0
2.
0

Setting of the indicated value in the maximum analog input

3.

0 0

Setting of the LOW cut-off rate

4.

0

5. 3. 6 0 3
6. 0 0 0 0
7. 0 0 0 0

Setting of the least significant digit
Setting of measurement indication
Setting of the maximum total per an hour(scaling data)
Setting of reset dwell time,the decimal point ,the synchronization pulse
Setting of OUT1 preset-output,OUT2 preset-output

MODE
Registered by RST
Please recommend to take notes of the value setting of each mode.

- 14 -

１０．Initial setting values and initialization
If the specifications desired by the user are requested prior to shipment, the meter will be set
these settings. Otherwise, the regular factory settings are shown below.
Value setting of each Mode
Mode
Initial settingNo.
ＡＢ
Ｃ Ｄ Ｅ Ｂ
１．

１

２．

０ ０．

Note
Ｃ

４．

Ｄ

Ｅ
Setting of the indication value in the
maximum analog input.

－０Mode contents

０

０

３．

Table 1

－

０

－

－

０

－

－

５．

３． ６

０

３

６．

０

０

０

０

７．

０

０

０

０

－

Setting of the LOW cut-off rate－

Setting of measurement indication.
Setting of the maximum total per anhour(scaling data)
Setting of reset dwell time, the decimal
point, the synchronization pulse
Setting of OUT1 preset-output,
OUT2 preset-output

Preset value setting of each alarm output
Alarm
No.

Ａ

Ｂ

Ｃ

Ｄ

Ｅ

ＯＵＴ１

９

９

９

９

９

ＯＵＴ２

９

９

９

９

９

Table 2

Initial setting

Notes
Ａ

Ｂ

Offset value setting
Offset
ＭＦＣIndication

Setting of the least significant digit.

Ｃ

Ｄ

Ｅ

Ｄ

Ｅ

Table 3
Notes

Initial setting
Ａ

Ｂ

Ｃ

Ｄ

Ｅ

０

０

０

０

０

Ａ

Ｂ

Ｃ

Initialization：Power on RET key being pressed to initialize the settings.
After the initialization, the set values will be as shown in Table 1-3.
※A set value of the analog input adjustment mode is not initialized.
！ Note：Since an initialization changes all existing setting values to the initial
setting values, be sure to record all the setting values before an initialization.
※ In case the computer froze when unusual functioning occurred with the normal operation,initialize
according to the above procedure and set the desired value again.

- 15 -

１１．Setting the mode
Calling up and modifying the mode setting
When a mode is set, operate each key according to the following table.

▼

MODE ＋

▲

MODE

ＲＳＴ

▼

Display unit
Ａ Ｂ
１．１

Ｃ
０

Ｄ
０

Operation procedure
While holding down the MODE key,
Ｅ press the
key for 2 seconds or more.
０． “1.” appears in displays A and the value setting
for mode 1 is shown.
▼

Operating key

Change the blinking indication position (figure).
Ａ Ｂ Ｃ Ｄ Ｅ Every press moves the position to the right by
１．１→０→０→０． a figure.
└－－←－－┘
Change the blinking numeral value.
Ａ Ｂ Ｃ Ｄ Ｅ Every pressraises the value by ones.
１．１ １ ０ ０． (0 → 1 → 2・・・9 → 0・・・)
↑
０→９

Ａ Ｂ Ｃ
２．１ ０
↑
１～７

Ｄ

Ｅ

Change the mode number. Every pressraises the number by one. There are 7
modes in total. When it reaches 7, it
returns to 1.
（１→２→・・・→７→１→２・・・）After adjusting the setting, make registration
with this key. It returns to the measuring mode
after registration.

！ ＜Note＞※In case you change mode setting, turn OFF mode protect.
If it is turned ON, change of mode setting will be made impossible.
Refer to １２ Mode protect function.

- 16 -

Contents of modes and setting values
Mode No.

１

MFC Ratemeter：Setting of the indication value in the maximum
analog inputＡ
Ｂ Ｃ Ｄ Ｅ
１． １ ０ ０．０
Indication value
0.001-9999（The decimal point can be set.）※Please do not use 0000.
Please set the indication value which is at the time of the maximum
analog input. It's indicated at the gradient between 2 points from "0".
！ ＜Caution＞※MFC Ratemeter is displayed in the position of this decimal point.
〔Ex.〕It'll be the following setting to make it indication for "1.234"
at the maximum analog input.
4 digits and decimal pointＡ Ｂ Ｃ
Mode No.1 １．１．２

Ｄ
３

Ｅ
４

- 17 -

Mode No. ＭＦＣRatemeter：Setting of the least significant digit

２

Ａ Ｂ Ｃ Ｄ Ｅ
２．
０
Least significant digit
０：Real
１：Fixed at 0
２：0 or 5【Least significant digit】
The form of indication for the least significant digit（digit on the right end）is selected.
０：Real・・・・・・・・Synchronized at the sampling time.
１：Fixed at 0 ・・・・Always, "0".
２：0 or 5・・・・・・・0-4 are expressed as 0, and 5-9 as 5.
！ ＜Caution＞※ This setting is effective in avoiding flickering of leastsignificant least significant digit.

Mode No. MFC Ratemeter：Setting of the LOW cut-off rate

３

Ａ
Ｂ
３．

Ｃ

Ｄ Ｅ
０ ０
LOW cut-off rate
０～２９％（"00" is a shut down.）【LOW cut-off rate】
In cases where inputs falling below a certain percentage of the current/
voltage input are not needed, the % value is inputted. Inputs of this value
or lower are disregarded without being included in rate and total readings.
〔Ex.〕When it's set the low cut rate "10%" by "0-5V" input type,does not measure by less than 0.5V of voltage input.

- 18 -

Mode No. Setting measurement indication

４

Ａ
Ｂ Ｃ
４．

Ｄ

Ｅ
０
Indicator
０：Rate meter/totalizer is switched.
１：Rate meter is fixed.
２：Totalizer is fixed.

【Indicator】
０：Rate meter/totalizer is switched.
Rate meter/totalizer is switched in ▲１：Rate meter is fixed.
Rate meter is fixed and indicated.
２：Totalizer is fixed.
Totalizer is fixed and indicated.

Mode No. Totalizer：Setting of the maximum total per an hour (scaling data)

５Ａ
Ｂ Ｃ Ｄ Ｅ５． ３．６ ０ ３
Exponential value（10 n ）n＝ 0 - 5

Scaling data
0.01-9.99 （Fixed decimal place）（Do not specify 0.00）
The total value per an hour in the maximum analog input is specified by
inputting a 3-digit value for B-D, and the exponential value（power of 10）
for E.The setting range is 0.01-999000.
〔Ex.〕

In case of the maximum total per an hour is "1000".

1000＝1.00 ×10 ３
↑
↑
ＢＣＤ
Ｅ

Setting will be as follows.

Ａ
Ｂ Ｃ Ｄ Ｅ５． １．０ ０ ３- 19 -

Mode No. MFC Totalizer：Reset time, decimal point position setting, the sync pulse output

６

Ａ
Ｂ
６． ０

Ｃ
０

Ｄ
０

Ｅ
０
Decimal point
０：０
１：０．０
２：０．００３：０．０００
４：０．００００
Reset time
０：2 sec.
１：Immediate（at ON edge）
Sync pulse output width setting.
０： １０ｍ sec
１：１００ｍ sec
２：
１sec

Synchronization pulse output digit
０：1st digits
１：2nd digits
２：3rd digits
３：4th digits
４：5th digits【Synchronization pulse output digit】
The digit whose change is to trigger the pulse output is specified.
※ synchronization pulse is output from the OUT1.
Before usage, please select the sync pulse on the sync
pulse mode 7-B.
【Sync pulse output width setting.】
The output pulse width is set.
【Reset time】
Reset time for the front Reset key is specified.
０：２secAfter the RST key is pressed for 2 seconds or longer, the reading
is reset.（Returns to the offset value.）
１：Immediate（at ON edge）
The reading is reset immediately when the RST key is pressed.
（Returns to the offset value.）！ ＜Caution＞※The MFC flowing quantity value is not reset though the
MFC integrated value is reset.
※It enters the state of the input prohibition for the MFC multiplication
value measurement while the reset key is being pushed(state of turning on) while measuring it.
The MFC flowing quantity value measurement is not prohibiting inputting.
【Decimal point】
The location of the decimal point setting. （Totalizer）- 20 -

Mode No. Setting of OUT1 and OUT2

７

Ａ
Ｂ
７． ０

Ｃ
０

Ｄ
０

preset-output

Ｅ
０
ＯＵＴ２：Upper or lower limit selection
０：Upper limit
１：Lower limit
ＯＵＴ２：Output selection
０：Disable
１：MFC Flow value
２：MFC Totalizer value
ＯＵＴ１：Upper or lower limit selection
０：Upper limit
１：Lower limit
ＯＵＴ１：Output selection
０：Disable
１：MFC Flow value
２：MFC Totalizer value
３：Synchronization pulse

The presetting output compares display value with the preset value,
and outputs it by the result.
Refer to “14．Calling up and modifying the preset value setting “for setting the preset values.
【Output selection】
A display to compare with a preset value is chosen.
０：Disable
Output is disabled.
１：MFC Rate meter
MFC Rate meter is compared with a preset value.
２：MFC Totalizer
MFC Totalizer is compared with a preset value.
３：Synchronization pulse output（ＯＵＴ１only）
It functions as a synchronization pulse output（Please set Mode No.6）※ The factory setting is a function stop
Please change to the setting matched to the usage when you use thealarm output.
【Upper or lower limit selection】
Output condition is specified.
０：Upper limit
It outputs, 「Indication value ≧ Preset value」
１：Lower limit
It outputs, 「Indication value ≦ Preset value」- 21 -

【Chart at the timing of the presetting output】

Fig.１０１２．Mode protect function
When the mode protect function is made effective, ▲ operation is invalid bymode setting. Therefore the set value can't be changed.
In an early stage, the mode protect function is invalid.
When doing the mode protect function setting, please operate as follows.
≪Operation of the mode protect≫▼

Operation key

IndicationＡ Ｂ Ｃ Ｄ Ｅ

Procedure
Press the key for 2 sec. or more.
The present mode protect state isdisplayed .

Ｌ － ｏ Ｆ Ｆ
〔The regular factory setting is↑“L-off” .〕（The mode protect：present）
Keep pressing
for 8 sec as it'scontinuously, the state of mode
protect is changed.
▼▼

Ａ Ｂ Ｃ Ｄ Ｅ▼

It usually returns when
stopped being pressed.

▼

Ｌ － ｏ ｎ↑（The mode protect：change） ※”OFF → ON” or “ON → OFF”！＜Caution＞※The preset value setting and the offset value setting always can bechanged.
※The mode protection function becomes “OFF”, when it's initialized.
- 22 -

is１３．Offset value setting
The preset totalizer reading value to be displayed directly following a reset is
specified.
For example, if the offset value is set at "01000", the reading becomes "1000"
when reset, and the count resumes from "1000".
In order to start the count from "0", the offset value should be set as "00000".
The possible range for offset is 0-99999.
The procedure for setting the offset value is described below.
≪Operation of the offset value setting≫※When there are no customer requests,the initial value setting is "00000".
Indication

MODE ＋ ▲Ａ Ｂ Ｃ Ｄ Ｅ
０ ０ ０ ０ ０▼

Ａ Ｂ Ｃ Ｄ Ｅ
０→０→０→０→０└－－－←－－－┘Ａ Ｂ Ｃ Ｄ Ｅ▲

０ １ ０ ０ ０

RST

Procedure
While pushing down MODE key, press ▲for 2 sec. or more.
"TO" LED lights up and the present offset
value is displayed.
Shifts the flashing indication to the digit to
the right.
Each timeis pressed, shifts theindication to one right.
▼

Operation key

Changes the value of the flashing digit.
Each time ▲ is pressed, the number
goes up by one.
（0→1→・・・→9→0→・・・）
After adjusting the setting, use RST toregister it.
The display returns to the readings following
registration.

≪After registration≫Ａ Ｂ Ｃ Ｄ Ｅ
RST

１ ０ ０ ０

The registered offset value can be displayedby pressing RST.
The totalizer count is resumed from thisvalue.

！ ＜Caution＞※The mode protection function is invalid.
（Please refer to "12. The mode protect function ".）※The decimal point is interlocked with the mode №6.

- 23 -

１４． Preset value setup (Preset Output)
Set the preset values. "OUT1 , OUT2”.
The setting ranges are 0-99999.
The procedure for setting the preset value is described below.
≪Operation of the preset value setting≫

MODE

Indication

Procedure

OUT1 OUT2

Press MODE for 2 sec. or more.

●○Ａ Ｂ Ｃ Ｄ Ｅ
９ ９ ９ 9. ９▼

OUT1 OUT2●○Ａ Ｂ Ｃ Ｄ Ｅ
９→９→９→9.→９└－－－←－－－┘
OUT1 OUT2▲●○Ａ Ｂ Ｃ Ｄ Ｅ
９ ０ ９ 9. ９▼

OUT1 OUT2

▲

RST

○
●
Ａ Ｂ Ｃ Ｄ Ｅ
９ ９ ９ 9. ９

"OUT1" LED lights up and the present
preset value is displayed.

Shifts the flashing indication to the digit to
the right.
Each time the key is pressed, shifts theindication to one right.
Changes the value of the flashing digit.
Each time ▲ is pressed, the number
goes up by one.
（0→1→・・・→9→0→・・・）
The OUT2 led lights up and the preset
value setting for OUT2 is shown.
Press
and ▲ to set the desired
setting value.
▼

Operation key

After adjusting the setting, use RST toregister it.
The display returns to the readings following
registration.

！ ＜Caution＞※Which of the totalizer or rate meter is the preset values used by must be
selected according to the mode №7.
※The decimal point is interlocked with the mode №1 for rate meter and themode №6 for totalizer.
※The mode protection function is invalid.
（Please refer to "12. The mode protect function ".）- 24 -

１５． Analog input adjustment！ ＜Caution＞※It's being adjusted according to an analog input type and an analog output
option, but when being adjusted by yourself, please setting it withthe following procedure.
When a power supply is supplied while is pressing ▲，analog input andanalog output adjustments mode setting.
Operation key

Indication

Procedure

Ａ Ｂ Ｃ Ｄ Ｅ▲

Ａ．Ｘ Ｘ Ｘ Ｘ

When ▲ is pressed, "A.XXXX" is displayed.
An analog input adjustment (minimum)is performed.

（X is a hexadecimal numbe）｢Ａ.-ｄ. common｣Ａ Ｂ Ｃ Ｄ Ｅ▲

Ａ．Ｘ Ｘ Ｘ Ｘ.
When indicating theregistered bit value,
it lights up.

While ▲ is being pressed, the registered
bit value can check it.
(It functions by "Ａ．-d．".)※When indicating the registered bit value,a decimal point of a least significant digit
lights up.

Ａ Ｂ Ｃ Ｄ Ｅ▲

Ａ．０ １ ２ ３．

When ▲ is pressed, the bit value ofminimum MFC flow signal is indicated.

(The bit values）
When RST is pressed while inputting analog
minimum input , the bit value by the minimum
MFC flow signal input is registered.

RST
Ａ Ｂ Ｃ Ｄ Ｅ
MODE

ｂ．Ｘ Ｘ Ｘ Ｘ

When MODE is pressed, "ｂ.XXＸX" is displayed.
An analog input adjustment (maximum) is
performed.

Ａ Ｂ Ｃ Ｄ Ｅ▲

ｂ．Ｘ Ｘ Ｘ Ｘ.

When ▲ is pressed, the bit value ofmaximum MFC flow signal is indicated.

（The bit values）
RST

When RST is pressed while inputting analog
maximum input , the bit value by the
maximum MFC flow signal input is registered.

- 25 -

Ａ Ｂ Ｃ Ｄ Ｅ
MODE

C．Ｘ Ｘ Ｘ Ｘ

When MODE is pressed, "C.XXＸX" is displayed.
External setting input adjustment (minimum)is performed.

Ａ Ｂ Ｃ Ｄ Ｅ▲

C．Ｘ Ｘ Ｘ Ｘ.

When ▲ is pressed, the bit value ofminimum External setting is indicated.

（The bit values）
When RST is pressed while inputting analog
minimum input , the bit value by theminimum External setting input is registered.

RST

Ａ Ｂ Ｃ Ｄ Ｅ
MODE

ｄ．Ｘ Ｘ Ｘ Ｘ

When MODE is pressed, "d.XXＸX" isdisplayed.
External setting input adjustment(maximum) isperformed.

Ａ Ｂ Ｃ Ｄ Ｅ▲

ｄ．Ｘ Ｘ Ｘ Ｘ.

When ▲ is pressed, the bit value ofmaximum External setting is indicated.

（The bit values）
When RST is pressed while inputting analog
maximum input , the bit value by the
maximum External setting input is registered.

RST

Ａ Ｂ Ｃ Ｄ Ｅ
MODE

Ａ．Ｘ Ｘ Ｘ Ｘ

Turn theWhen MODE is pressed, "A.XXXX" isdisplayed.
An analog input adjustment (minimum) is
performed.
After registration , the power supply stateis “OFF”.

power“OFF”
Ａ Ｂ Ｃ Ｄ Ｅ
Turn thepower“ON”

Measurement state

When the power supply state is “ON”
onceagain, a measured value indicates.

- 26 -

１６．External dimensions
External dimensions

Fig.１１（Unit：mm）
Panel cut size and installation interval
Fig.１２70 or more

45 -0

+0.5

+0.8
92 -0

120 or more
（Unit：ｍｍ）
When you mount the machine, please provide a space of at least 20mm
from the wall in the direction of up and down, right and left and rear(terminal stand side).

- 27 -

１７． Noise countermeasure
When influence of noise occurred, please be careful about the following.
When doing a blackout and a malfunction by influence of noise, please beinitialized. （Refer to page 15）
Please take notes of the value setting of each modes.
If it becomes normal, please take the following measure.
And please setting it once again.
（１） Please use shielding wire for a Signal wire and D-Sub code , separate as much as
possible from a source of noise.
（２）Please avoid a source of noise (power supply line and inverter)，make it
as short as possible. After that,please install a Signal wire and D-Sub code.
（３）Please separate from a power supply line,in a case affected by noise.
And please install a EMI filter.
（４）The manner of the Signal wire and D-Sub code installation.
When there is a power supply line near the Signal wire and D-Sub code,a surge and noise are influenced.
Therefore , install a Signal wire and D-Sub code independently or for
50 cm or more.
（５）When being affected than otherequipment, please use a spark killer
like Fig.1３ and take a measure.

Fig.１３

Spark killer

Tact actuator（６）If there is an unclear point, please even consult with use about a dealer
or us.

- 28 -

１８． Troubleshooting
When abnormality occurred, please check it as follows.
Ｎｏ．
Problem
Checking point
Solution
Display does not→Has it connected with
→Connect correctly according to１
appear at all.
the rear terminal"Connecting terminal boards"
correctly?
（Refer to page 6-9）.
↓
Is the screw tightened
When display still does notcertainly?
appear, have it serviced.
→Once, do the initialization.
→Check with the test
Unusual２（Refer to page 15）.
mode
LED lighting, key↓(Refer to page 1３）.
switch operation,
When it still does not resume
preset output.
normal status, have it serviced.
→Check whether to be set at the→Is the setting of theRate meter３
position where each switch is
DISP switch correct?
remains at "0"
proper.
→Is the position of theand does not
COMMAND switch
count.
correct?
→Scaling data is small or→Is the setting forthe low cut has started.
each mode correct?
↓→Please the connection of the→Is the input signal
input signal is reconfirmed.
normal?
The MFC input analog input is↓tested according to the static↓
test mode. (Refer to page 13. )↓↓↓→Please confirm the manual.
→Is the output signal↓
from MFC normal?
↓↓
When it still does not resume→Does the input methodof the meter match
normal status, make a contact
an output signal
to a dealer or us.
method of the MFC?
→Checkwhether the→Change the scaling data.
OV lamp４
scalingisnottoolarge.
（Refer to page 17 for mode №1，
remains lit.
（ＭＦＣ Flow rate measurement value）↓→Overflow indication.
page 20 for mode №6 and(Totalizer)
page 21 for mode №7.）↓
→Influence of noise.
→Refer to page 28 for“About a noise countermeasure”.
↓
When it still does not resume
normal status, make a contact
to a dealer or us.
■EMC standard ( EN61326-1:2021 )Emission
EN55011 Group 1 Class A
This product complies with EMC standards for industrial environments.
When used in a residential or light industrial environment, it may cause electromagnetic
interference to other equipment.
Immunity
EN61000-4-2，EN61000-4-3，EN61000-4-4，EN61000-4-5，EN61000-4-6，EN61000-4-11
This product complies with EMC standards for industrial environments. Users should pay particularattention to the electromagnetic immunity listed below.
・Power supply quality ・Electrostatic discharge ・Radiated noise・Conducted noise・Magnetic field noise・Surge noise- 29 -