NAScleanR○

1.5"W-Seal IGS Gas Filters (for integrated gas panel applications)Standard Specification

NASclean
IGS Gas Filters (for integrated gas panel applications)
R○Particle retention(μm)

Maximum
OperatingPressure(MPa)

Maximum
Differential
Pressure(MPa)

Maximum
OperatingTemperature(℃)

BF-1.5U-10-M

0.0025

4.8

4.5

460

BF-1.5U-30-M

0.0025

4.8

4.5

460

BF-1.5U-60-M

0.0025

4.8

4.5

460

Model

Material
Media

Housing

316L
Stainless Steel

316L
Stainless Steel

NASclean® IGS filters feature Nippon Seisen's unique pleated filter media fabricatred in a
proprietary process using stainless steel (316L) short fibers. The NASclean® media has a double-layer※The material of media except the 316L stainless steel is available.

structure with a membrane with a super-fine pore structure on top of a highly porous support layer
which ensures optimal gas displacement and superior dry down properties.
The NASclean® filter media delivers perfect particle retention, and has super-high porosity resulting
in excellent flow characteristics and enabling high flow through a compact filter.

Dimensions
Unit：mmOUTLET

C

Model

INLET

A

B

C

BF-1.5U-10-M

41

827

BF-1.5U-30-M

51

827

BF-1.5U-60-M

69827

B
A

Flow performance■ BF-1.5U-10-M■ BF-1.5U-30-M■ BF-1.5U-60-M

0.05

0.1

0.1

Inlet Pressure
0.2MPa

0.02

0.01

004

8121620

Flow Rate (N2,SLPM)

0.07
0.06
0.05
0.04
0.03

0.06
0.05
0.04
0.03
0.02

0.01

0.01
020

4060

Flow Rate (N2,SLPM)

801000.5MPa

0.07

0.02

00.2MPa

0.08

0.5MPaPressure Drop (MPa)0.03

Inlet Pressure0.09

0.2MPa0.08

0.5MPaPressure Drop (MPa)

Pressure Drop (MPa)0.04

Inlet Pressure

0.09

0020406080100

Flow Rate (N2,SLPM)※The data listed in this catalogue are representative figures provided under specific requirements.
Please confirm whether the specifications of the product adapt to operating condition.
※Nippon Seisen do not guarantee about the merchantability of fiter or fitness for particular purpose.
The specifications of the product have a case to change without a notice.
※Please refer for any questions to us.

Features
Superior Flow CharacteristicsExcellent Dry down &Gas Displacement Properties
Perfect particle retention performancewww.n-seisen.co.jp/en/semicon@n-seisen.co.jp

Stainless Steel fiber 1st Department Osaka Sales Section
Kohgin Bldg., No.1-1, 4-Chome, Kohraibashi, Chuo-Ku, Osaka, 541-0043, Japan TEL : +81-6-6222-5436 FAX : +81-6-6222-1250
Stainless Steel fiber 2nd Department Tokyo Sales Section
Central Bldg., 1-5 1-Chome, Kyobashi, Chuo-ku, Tokyo, 104-0031, Japan TEL : +81-3-5203-1643 FAX : +81-3-5203-1648
Engineering of Metal Fiber Department
No.17-1, 4-Chome, Ikenomiya, Hirakata, Osaka, 573-8522, Japan TEL : +81-72-840-1268 FAX : +81-72-840-5869
GFE-IG-OS1304

NASclean is trademark of Nippon Seisen.
® Indicate a Nippon Seisen trademark registered in the USA.

ISO9001*& ISO14001** Registration* Head office & all factories **Hirakata Factory

Compact and Cost EffectiveNASclean

R○NASclean

1.125"W-Seal IGS Gas Filters (for integrated gas panel applications)Standard Specification

1.125"C-Seal IGS Gas Filters (for integrated gas panel applications)Standard Specification

Particle Retention(μm)

MaximumOperatingPressure(MPa)Maximum
Differential
Pressure(MPa)Maximum
OperatingTemperature(℃)

BF-1.125U-10-M

0.0025

7.22.8460

BF-1.125U-30-M

0.00254.02.8460

BF-1.125U-60-M

0.0025

8.6

4.5460Model

R○Material
Media

Housing

316L
Stainless Steel

316L
Stainless SteelParticle retention(μm)

Maximum
OperatingPressure(MPa)Maximum
Differential
Pressure(MPa)Maximum
OperatingTemperature(℃)

BF-1.125C-5-M

0.00254.0

2.8460

BF-1.125C-30SLM

0.00254.0

2.8460

BF-1.125C-50SLM

0.002510.64.5

460

Model

※Nickel media is also available.

Media

Housing316L
Stainless Steel

316L
Stainless Steel※The material of media except the 316L stainless steel is available.

Dimensions

Dimensions
Unit：mm
C

Model

INLET
B

A

BF-1.125U-10-M

46

BF-1.125U-30-M

75

BF-1.125U-60-M

98

B

Unit：mmOUTLET

C

INLET

226.5

Model
C

OUTLET

2227.2

B

A

B

C

BF-1.125C-5-M

36.7

11.2

22

BF-1.125C-30SLM

76.2

11.2

22

BF-1.125C-50SLM

98.1

6.6

27.2

A

A

Flow performance

Flow performance■ BF-1.125U-10-M■ BF-1.125U-30-M■ BF-1.125U-60-M■ BF-1.125C-5-M■ BF-1.125C-30SLM■ BF-1.125C-50SLM

0.05

0.1

0.1

0.05

0.05

0.05

0.03

0.02

0.01

0048121620

Flow Rate（N2,SLPM）

0.08

0.2MPa0.08

0.2MPa0.5MPa

0.07
0.06
0.05
0.04
0.03

0.07
0.06
0.05
0.04
0.03

0.02

0.02

0.01

0.01

00204060

Flow Rate（N2,SLPM）

80

100

00204060

80

100

semicon@n-seisen.co.jp

0.030.02

Flow Rate（N2,SLPM）

00.2MPa

0.04

0.5MPa0.01※The data listed in this catalog are representative figures provided under specific conditions.
Please confirm whether the specifications of the product apply to desired operating conditions.
※Nippon Seisen makes no guarantee regarding the applicability of its fiters or fitness for particular applications.
The specifications of the product are subject to change without notice.
※Please contact Nippon Seisen with any questions .

www.n-seisen.co.jp/en/

0.2MPa0.04

0.5MPaInlet Pressure

Inlet Pressure

0.03

0.02

48121620

Flow Rate（N2,SLPM）

00.5MPa

0.03

0.02

0.01

0.0100.2MPa

0.040.5MPa

Pressure Drop（MPa）

Pressure Drop（MPa）

0.5MPa0.09

Inlet Pressure

Pressure Drop（MPa）

0.040.09

Inlet Pressure

Pressure Drop（MPa）

0.2MPaInlet Pressure

Pressure Drop（MPa）

Inlet Pressure

Pressure Drop（MPa）

Material

00204060

Flow Rate（N2,SLPM）

80

100

0204060

80

100

Flow Rate（N2,SLPM）※The data listed in this catalogue are representative figures provided under specific requirements.
Please confirm whether the specifications of the product adapt to operating condition.
※Nippon Seisen do not guarantee about the merchantability of fiter or fitness for particular purpose.
The specifications of the product have a case to change without a notice.
※Please refer for any questions to us.

Stainless Steel fiber 1st Department Osaka Sales Section
Kohgin Bldg., No.1-1, 4-Chome, Kohraibashi, Chuo-Ku, Osaka, 541-0043, Japan TEL : +81-6-6222-5436 FAX : +81-6-6222-1250
Stainless Steel fiber 2nd Department Tokyo Sales Section
Central Bldg., 1-5 1-Chome, Kyobashi, Chuo-ku, Tokyo, 104-0031, Japan TEL : +81-3-5203-1643 FAX : +81-3-5203-1648
Engineering of Metal Fiber Department
No.17-1, 4-Chome, Ikenomiya, Hirakata, Osaka, 573-8522, Japan TEL : +81-72-840-1268 FAX : +81-72-840-5869
GFE-IG-OS1304

www.n-seisen.co.jp/en/

semicon@n-seisen.co.jp

Stainless Steel fiber 1st Department Osaka Sales Section
Kohgin Bldg., No.1-1, 4-Chome, Kohraibashi, Chuo-Ku, Osaka, 541-0043, Japan TEL : +81-6-6222-5436 FAX : +81-6-6222-1250
Stainless Steel fiber 2nd Department Tokyo Sales Section
Central Bldg., 1-5 1-Chome, Kyobashi, Chuo-ku, Tokyo, 104-0031, Japan TEL : +81-3-5203-1643 FAX : +81-3-5203-1648
Engineering of Metal Fiber Department
No.17-1, 4-Chome, Ikenomiya, Hirakata, Osaka, 573-8522, Japan TEL : +81-72-840-1268 FAX : +81-72-840-5869
GFE-IG-OS1304

NASclean

R○NASclean

1.125"W-Seal IGS Gas Filters (for integrated gas panel applications)Standard Specification

1.125"C-Seal IGS Gas Filters (for integrated gas panel applications)Standard Specification

Particle Retention(μm)

Maximum
OperatingPressure(MPa)Maximum
Differential
Pressure(MPa)Maximum
OperatingTemperature(℃)

BF-1.125U-10-M

0.00257.2

2.8460

BF-1.125U-30-M

0.0025

4.0

2.8

460

BF-1.125U-60-M

0.0025

8.6

4.5

460

Model

R○Material
Media

Housing

316L
Stainless Steel

316L
Stainless SteelParticle retention(μm)

Maximum
OperatingPressure(MPa)Maximum
Differential
Pressure(MPa)

Maximum
OperatingTemperature(℃)

BF-1.125C-5-M

0.0025

4.0

2.8

460

BF-1.125C-30SLM

0.0025

4.0

2.8

460

BF-1.125C-50SLM

0.0025

10.6

4.5460Model※Nickel media is also available.

Media

Housing

316L
Stainless Steel

316L
Stainless Steel※The material of media except the 316L stainless steel is available.

Dimensions

Dimensions
Unit：mm
C

Model

INLET
B

A

BF-1.125U-10-M

46

BF-1.125U-30-M

75

BF-1.125U-60-M

98

B

Unit：mmOUTLET

C

INLET

226.5

Model
C

OUTLET

2227.2

B

A

B

C

BF-1.125C-5-M

36.7

11.2

22

BF-1.125C-30SLM

76.2

11.2

22

BF-1.125C-50SLM

98.1

6.6

27.2

A

A

Flow performance

Flow performance■ BF-1.125U-10-M■ BF-1.125U-30-M■ BF-1.125U-60-M■ BF-1.125C-5-M■ BF-1.125C-30SLM■ BF-1.125C-50SLM

0.05

0.1

0.10.05

0.05

0.05

0.03

0.02

0.01

0048121620

Flow Rate（N2,SLPM）

0.08

0.2MPa0.08

0.2MPa0.5MPa

0.07
0.06
0.05
0.04
0.03

0.07
0.06
0.05
0.04
0.03

0.02

0.02

0.01

0.01

00204060

Flow Rate（N2,SLPM）

80

100

00204060

80

100

semicon@n-seisen.co.jp

0.03

0.02

Flow Rate（N2,SLPM）

00.2MPa

0.04

0.5MPa0.01※The data listed in this catalog are representative figures provided under specific conditions.
Please confirm whether the specifications of the product apply to desired operating conditions.
※Nippon Seisen makes no guarantee regarding the applicability of its fiters or fitness for particular applications.
The specifications of the product are subject to change without notice.
※Please contact Nippon Seisen with any questions .

www.n-seisen.co.jp/en/

0.2MPa0.04

0.5MPaInlet Pressure

Inlet Pressure

0.03

0.02

48121620

Flow Rate（N2,SLPM）

00.5MPa

0.03

0.02

0.01

0.01

00.2MPa

0.04

0.5MPaPressure Drop（MPa）

Pressure Drop（MPa）

0.5MPa0.09

Inlet Pressure

Pressure Drop（MPa）

0.04

0.09

Inlet PressurePressure Drop（MPa）

0.2MPaInlet Pressure

Pressure Drop（MPa）

Inlet Pressure

Pressure Drop（MPa）

Material

00204060

Flow Rate（N2,SLPM）

80

100020406080

100

Flow Rate（N2,SLPM）※The data listed in this catalogue are representative figures provided under specific requirements.
Please confirm whether the specifications of the product adapt to operating condition.
※Nippon Seisen do not guarantee about the merchantability of fiter or fitness for particular purpose.
The specifications of the product have a case to change without a notice.
※Please refer for any questions to us.

Stainless Steel fiber 1st Department Osaka Sales Section
Kohgin Bldg., No.1-1, 4-Chome, Kohraibashi, Chuo-Ku, Osaka, 541-0043, Japan TEL : +81-6-6222-5436 FAX : +81-6-6222-1250
Stainless Steel fiber 2nd Department Tokyo Sales Section
Central Bldg., 1-5 1-Chome, Kyobashi, Chuo-ku, Tokyo, 104-0031, Japan TEL : +81-3-5203-1643 FAX : +81-3-5203-1648
Engineering of Metal Fiber Department
No.17-1, 4-Chome, Ikenomiya, Hirakata, Osaka, 573-8522, Japan TEL : +81-72-840-1268 FAX : +81-72-840-5869
GFE-IG-OS1304www.n-seisen.co.jp/en/semicon@n-seisen.co.jp

Stainless Steel fiber 1st Department Osaka Sales Section
Kohgin Bldg., No.1-1, 4-Chome, Kohraibashi, Chuo-Ku, Osaka, 541-0043, Japan TEL : +81-6-6222-5436 FAX : +81-6-6222-1250
Stainless Steel fiber 2nd Department Tokyo Sales Section
Central Bldg., 1-5 1-Chome, Kyobashi, Chuo-ku, Tokyo, 104-0031, Japan TEL : +81-3-5203-1643 FAX : +81-3-5203-1648
Engineering of Metal Fiber Department
No.17-1, 4-Chome, Ikenomiya, Hirakata, Osaka, 573-8522, Japan TEL : +81-72-840-1268 FAX : +81-72-840-5869
GFE-IG-OS1304

NAScleanR○

1.5"W-Seal IGS Gas Filters (for integrated gas panel applications)Standard Specification

NASclean
IGS Gas Filters (for integrated gas panel applications)
R○

Particle retention(μm)

Maximum
OperatingPressure(MPa)Maximum
Differential
Pressure(MPa)Maximum
OperatingTemperature(℃)

BF-1.5U-10-M

0.0025

4.8

4.5

460

BF-1.5U-30-M

0.0025

4.8

4.5

460

BF-1.5U-60-M

0.00254.8

4.5460Model

MaterialMedia

Housing

316L
Stainless Steel

316L
Stainless Steel

NASclean® IGS filters feature Nippon Seisen's unique pleated filter media fabricatred in aproprietary process using stainless steel (316L) short fibers. The NASclean® media has a double-layer※The material of media except the 316L stainless steel is available.

structure with a membrane with a super-fine pore structure on top of a highly porous support layer
which ensures optimal gas displacement and superior dry down properties.
The NASclean® filter media delivers perfect particle retention, and has super-high porosity resulting
in excellent flow characteristics and enabling high flow through a compact filter.

Dimensions
Unit：mmOUTLET

C

Model

INLET

A

B

C

BF-1.5U-10-M

41827

BF-1.5U-30-M

51

827

BF-1.5U-60-M

69827

B
A

Flow performance■ BF-1.5U-10-M■ BF-1.5U-30-M■ BF-1.5U-60-M

0.05

0.1

0.1

Inlet Pressure
0.2MPa

0.02

0.01

004

8121620

Flow Rate (N2,SLPM)

0.07
0.06
0.05
0.04
0.03

0.06
0.05
0.04
0.03
0.02

0.01

0.01
020

4060

Flow Rate (N2,SLPM)

801000.5MPa

0.07

0.02

00.2MPa

0.08

0.5MPaPressure Drop (MPa)0.03

Inlet Pressure

0.090.2MPa

0.080.5MPa
Pressure Drop (MPa)

Pressure Drop (MPa)0.04

Inlet Pressure

0.09

0020406080

100

Flow Rate (N2,SLPM)※The data listed in this catalogue are representative figures provided under specific requirements.
Please confirm whether the specifications of the product adapt to operating condition.
※Nippon Seisen do not guarantee about the merchantability of fiter or fitness for particular purpose.
The specifications of the product have a case to change without a notice.
※Please refer for any questions to us.

Features
Superior Flow Characteristics
Excellent Dry down &Gas Displacement Properties
Perfect particle retention performancewww.n-seisen.co.jp/en/semicon@n-seisen.co.jp

Stainless Steel fiber 1st Department Osaka Sales Section
Kohgin Bldg., No.1-1, 4-Chome, Kohraibashi, Chuo-Ku, Osaka, 541-0043, Japan TEL : +81-6-6222-5436 FAX : +81-6-6222-1250
Stainless Steel fiber 2nd Department Tokyo Sales Section
Central Bldg., 1-5 1-Chome, Kyobashi, Chuo-ku, Tokyo, 104-0031, Japan TEL : +81-3-5203-1643 FAX : +81-3-5203-1648
Engineering of Metal Fiber Department
No.17-1, 4-Chome, Ikenomiya, Hirakata, Osaka, 573-8522, Japan TEL : +81-72-840-1268 FAX : +81-72-840-5869
GFE-IG-OS1304

NASclean is trademark of Nippon Seisen.
® Indicate a Nippon Seisen trademark registered in the USA.

ISO9001*& ISO14001** Registration* Head office & all factories **Hirakata Factory

Compact and Cost Effective