Motorized Stage

Motorized Linear Stage Lineup
Travel guideMotorized Goniometer Stage Lineup
Drive mechanism

Model

Model

Guidance

KGB06

KXT
Ball screwLinear ball guide°45︹ XY-axis
・ Z-axis
・ XYZ-axis︺
X-axisKXG
Gothic-arch Groove

P.1-017
P.1-021
P.1-041
P.1-055

Gothic-arch Groove

KXT
PG
KXG
KXL

Goniometer Stage

PG

KGB07
P.1-145

KGW
Worm gear

KXL

KG
P.1-149

KXC

Motorized Rotary Stage Lineup
Closs roller guide

P.1-083
P.1-093
P.1-101

KXC
KX
KS101,102

Slide guide

KX

KRB

KRE04/06

KRE10360°

Rotary Stage

KHE

Gothic-arch Groove

P.1-113

Ball screw

KXS

45

Horizontal Z-axis

Gothic-arch Groove

Model

P.1-169

KS101,KS102

P.1-121

Linear ball guide

Drive mechanism

Worm gear
KRW
ウォームギヤ
P.1-177 KRE
P.1-173 KRW
P.1-181 KS402

KS402-75,100

KH

Closs roller guideKS402-180
KS332-8N,12
P.1-117

KS451
Direct drive
P.1-1891001)JHISJHJEJUZ9:4UBHFTAn angular bearing is built in the stage.
It is useable in a stabilized state even the high-resolution-microscope.

Load capacity 20kgfմ
Selectable lead of ball bearing.

Guidance"VUP'PDVT˥Except for KXT series

Ӗ-JOFBSCBMMHVJEFTUBHF

Ӗ9:TMJEFHVJEF

-JGUBCMF1BOFMBOE1MBUF*NBHF"MJHONFOU 3PUBUJPOTUBHF 

Available horizontal alignment with the horizontal Z stage.

Can be used to interface with the image processing unit.
Sine motion stages that integrated a ball bearing drive are designed with durability.

Ӗ)PSJ[POUBM;DSPTTSPMMFSHVJEF

Ӗ4JOFNPUJPOSPUBUJPOTUBHF"OHVMBS"MJHONFOUPG0QUJDBM1BSUT (POJPNFUFSTUBHF BYJT4UBHF6OJU

Fine angle adjustment of device for optical pick-up.
(It has excellent durability)

It is ideal for alignment of LCD and digital camera image sensor.
Please contact us if you need more information for configurations.

Ӗ4JOFNPUJPO(POJPNFUFSTUBHF

Ӗ4UBHFVOJU JODMVEJOHTQFDJBMPSEFS
1002

Motorized Stage

Connection Example
Host device

Guidance

PC

PLC

RS232C/USB

I/O

Operation by hand

Stepping motor controller

DT100(Handy terminal)

DS102 series

PLC

CPU

Motioncontrol

I/O

Motor driver٬Full٬Half
٬Microstep

٬Full٬Half: DS102ANR
٬Microstep: DS102AMS

P.1-205
P.1-199

P.1-197

Cable

Cable

Between stage and controller (With both end connectors)

Between stage
and controller

For 12 pin ٬Robot cable٬Standard cable(One end loose wire)

For 16 pin ٬Robot cable٬Standard cable

P.1-207֐

P.1-207֐

Stage
KS102 seriesSpecificationof 12-pin

KXS seriesSpecificationof 16-pin

P.1-109

P.1-121

Configurations
Operation by hand

Host device

٬Stage٬Cable٬Stepping motor controller٬Handy terminal

٬Stage٬Cable٬Stepping motor controllerDSCONTROL-WIN٬PC Cable

DT100

Stage

PC

DSCONTROL-WIN

Stage

PLC

Stage

Stepping motor controller

Cable

Cable

Stepping motor controller

Cable

Motor driver

Cable٬DS100-USB-1.8
٬D100-R9-2

1003

٬Stage٬Cable٬Motor driver

Controller
ӖStepping motor controller See page

Driver type
Universal input and output
Maxium power consumption
WeightӖHandy terminal: DT100 See pageSPEC
DS102AӗӗDS102Aӗӗ-IO
DS102ANR: Full/Half switching
DS102AMS: Microstep (16 steps)
Without
With
70W
2.2kg

Guidance

Model

P.1-197 for specification details
DS112AӗӗDS112Aӗӗ-IO
DS112ANR: Full/Half switching
DS112AMS: Microstep (16 steps)
Without
With
DC24V Less than 2.5A
1.2kg

P.1-199 for specification details

DT100 handy terminal feature allows remotely
operation a stepping motor controller DS102/DS112
on the board and rack.
Available to use for continuous operation, step
operation, zero return and program execution in hand.
Displays 16 digits and 2 rows on the LCD.

ӖBasic Specifications
Operating condition:0֐40˳յ20֐80RH(drainless)
Strage condition:20֐60˳յ20֐80RH(drainless)Power input : DC24V (Supplied from controller)
SPEC
Model
WeightDT100
300g

P.1-200

Sample display

ӖStage controller sample program
Must be needed to make a program if control DS102 series from your PC.
Please download our free sample program from our HP.

https://eng.surugaseiki.com/

Attention: You might not be follow this sample program.
You need to program finally.

1004Motorized Stage

Electrical Specification
Connector Specifications

Guidance

Being used on the 2 kinds of connector for our stages as follows. ˥For more information, see the electrical specification of each model.
Connector type
Applicable connector on
acceptance side
Pin counts
Pin allocation

HR10A-10J-12P (73) (Hirose Electric Co.,Ltd.)SRCN2A21-16P (JAE)

HR10A-10P-12S (73) (Hirose Electric Co.,Ltd.)SRCN6A21-16S (JAE)1216

ռPin allocationս

Pin assignment

ռPin allocationս

1

10

2

9

3

8

11

7

4

12

5

6

10 11 12 13
14 15 16

ռPin assignmentսռPin assignmentս
1
2
3
4
5
6
7
8
9
10
11
12

StagesMotor lead
Motor lead
Motor lead
Motor lead
Motor lead
CWLS output
CCWLS output
ORG2
Power input (+)
ORG1
Power input (-)
F.G

˥May not function
properly when you
use DS series.

1 Motor lead
2 Motor lead
3 Motor lead
4 Motor lead
5 Motor lead
6 CWLS output
7 Open8 CCWLS output
9 Open10 Power input (+)
11 NORG⭳ⱱ
12 Electromagnetic brake (+)
13 Electromagnetic brake (-) ˥May not function
properly when you use
14 ORG output
15 Power input (-)
the electromagnetic
16 F.G
brake(+,-).

KS102 series
KXS18 series

KXL06 series
KXC04/06 series
KX series
KS332 series
KS4ӗӗ series
KG series
KXT/KHE/KRE series

KXG06 series
PG series
KS101 series
KH series
KRB series
KGW series
KRW series

1 2 3 45 6 7 8 9

List of cables
Cable option code
Specification2
One end loose 2m
4m
One end loose 4m
Only connector (Cable is not included)
Without
Robot cable 2m
Robot cable 4m
Robot cable 2m one end loose
Robot cable 4m one end loose2One end loose 2m
4m
One end loose 4m
Only connector (Cable is not included)
Without
Robot cable 2m
Robot cable 4m
Robot cable 2m one end loose
Robot cable 4m one end looseӖIn case of using ORG2
Cable for four sensors

1005

Stage-sideconnector

12 pin16 pinLinear

Cable typeD214−2−2E
D214−2−2EK
D214−2−4E
D214−2−4EK‫٭‬‫٭‬D214−2−2R
D214−2−4R
D214−2−2RK
D214−2−4RK
D214−1−2E
D214−1−2EK
D214−1−4E
D214−1−4EK‫٭‬‫٭‬D214−1−2R
D214−1−4R
D214−1−2RK
D214−1−4RK

PG

KXL

Blank
1
2
3
4
5
6
7
9
8

A
B
C
D
E
Blank
F
H
G
J

KXS

KXG

KXC

KX07/08
KS101 KS102
KX10/12

A
B
C
D
E
Blank
F
H
G
J

A
B
C
D
E
Blank
F
H
G
J

Blank
1
2
3
4
5
6
7
9
8

A
B
C
D
E
Blank
F
H
G
J

12 pinD214−2−ӽ
Please select a "cable code:5(without cable) "for your order. Please order a cable for 4 sensors.
˥See page P.1-207 for 4 sensor cable.

Blank
1
2
3
4
5
6
7
9
8

KXT

F
H
G
J

Horizontal Z
KH
KHE
KS332

goniometer
KGB
KG05
KGW KG07

KRB
KRW

Rotary
KS402
KS451

Blank
1
2
3
4
5
6
7
9
8

A
B
C
D
E
Blank
F
H
G
J

Blank
1
2
3
4
5
6
7
9
8

A
B
C
D
E
Blank
F
H
G
J

Blank
1
2
3
4
5
6
7
9
8

ӽ

ӽ

F
H
G
J

Blank
1
2
3
4
5
6
7
9
8

ӽ

KRE

F
H
G
J

How to Check the Specification List

Accuracy speciﬁcation
Sensor

KS000-0000mm
00×00mm
φ0 lead 0◯◯◯◯◯◯−◯◯ processing
0kg
Pulse
00mm/sec
Within 00μm
Within ±00μm
0kgf【0N】
00”N・cm
Within 00μm
Within 00μm
Within 00μm
Within 00μm
Within 00μm
Within 00”/Within 00”
Installed
Installed−◯ of M−◯

ΖTravel length

①
②
③
④
⑤
⑥
⑦
⑧
⑨
⑩
⑪
⑫
⑬
⑭
⑮
⑯
⑰
⑱
⑲
⑳

ΞUni-directional positioning accuracy

Represent the distance of the stage surface from CW limit to CCW

See the inspector instruction P.2-187֐
ΟRepeatability positioning accuracy

limit.
Tracing diagram shows at the stroke center.

See the inspector instruction
ΠLoad capacity

ΗTable sizeShows size of stage table surface. Displays multiply width by length.
ΘFeed screw (Ball screw)

Load capacity means it can be mounted on the center of the stage.
Speed value shows drivable with maximum speed. Load capacity of Z

Shows size and lead of ball screw.

stage shows 'Load capacity (at the excitation)'.
ΡMoment stiffness

ΙGuideShows system of moving guide.

See the inspector instruction P.2-187֐
΢Lost motion

ΚMain materials-Finishing
Shows materials and surface finishing that is configured upper side ofstage and housing.

See the inspector instruction P.2-187֐
ΣBacklashSee the inspector instruction P.2-187֐

ΛWeight
Shows mass of products. (not include cable weight)

ΤStraightness
See the inspector instruction P.2-187֐

ΜResolution
Shows stage travel length for a signal per pulse. Basically spec shows
resolution at the full-step. The division number of full-step, half-stepand micro-step driver might be changed at the controller.

Travel length per pulse（mm）＝Ball bearing lead（mm）
×

Guidance

Mechanical speciﬁcation

SPEC
Model
Travel length
Table size
Feed screw (Ball screw)
Guide
Main materials-Finishing
WeightResolution
MAX speed
Uni-directional positioning accuracy
Repeatability positioning accuracy
Load capacity
Moment stiffness
Lost motion
Backlash
Straightness
Parallelism
Motion parallelism
Pitching/Yawing
Limit sensor
Origin sensor
Slit origin sensor
Provided screw（hexagon-headed bolt）

1
Motor step angle
×
n
360°

˥n is division number of micro-step.
n=1 is for full-step, n=2 is for half-step. Selectable micro-step fromΥParallelism
See the inspector instruction P.2-187֐
ΦMotion parallelism
See the inspector instruction P.2-187֐
ΧPitching/yawing
See the inspector instruction P.2-187֐
ΨSensor1٬٬٬250 division number 16 paterns. Stage only has Full/Half

Shows presence or absence of the equipment such as limit, origin

display can be divided with our driver for micro-step.

and slit origin sensors.

ΝMAX speed
Put maximum load, the speed that can be driven by full-step settingΩProvided screw
Shows size and numbers of the provided screws.

with our controller.
˥Speed can be different based on the driver controller and the load.

1006

Motorized Stage

Stage Selection Guide
Motorized Stage

Selection Guide

Intensive
comparison[Travel length–20mm]
PG413

Mechanicalspecification

The photo shows ӗPG615

PG513

KXT04015

KXT06015

PG615

The photo shows ӗPG615

Travel length

13mm

13mm

15mm

15mm

15mm

Table size

40×40mm

50×50mm

40×40mm

60×60mm

60×60mmFeed screw (Ball screw)Į6 lead 1

Į6 lead 1

Į6 lead 1

Į6 lead 1

Į6 lead 1

Guide

Linear ballLinear ballLinear ballLinear ballLinear ball

StainlessStainless

Steel

Steel

StainlessMain materials
Finishing

Opposite side of the end face finishing Opposite side of the end face finishing Opposite side of the end face finishing Opposite side of the end face finishing Opposite side of the end face finishing

Full length

142.5mm

152.5mm105.5mm

125.5mm

162.5mm

Full width

56.8mm

66.8mm

56mm

69.5mm

76.8mmStage thickness

20mm

20mm

20mm

20mm

20mm

Weight0.50kg0.60kg0.38kg0.60kg0.70kgAccuracy
specification

PG413

PG513

KXT04015

KXT06015

PG615

Full/Half

2μm/1μm

2μm/1μm

2μm/1μm

2μm/1μm

2μm/1μm

Resolution Micro step
(1/20 split)

0.1μm

0.1μm

‫٭‬

‫٭‬

0.1μm

MAX speed

10mm/sec

10mm/sec

10mm/sec

10mm/sec

10mm/sec

Uni-directional positioning accuracy

Within 6μm

Within 6μm

Within 10μm

Within 10μm

Within 6μm

Repeatability positioning accuracy

Within ±0.5μm

Within ±0.5μm

Within ±1μm

Within ±1μm

±0.5μmLoad capacity

10kgf [98N]

10kgf [98N]

10kgf [98N]

10kgf [98N]

10kgf [98N]

Pitch

0.22ˢ/N٬cm

0.14ˢ/N٬cm

0.38ˢ/N٬cm

0.10ˢ/N٬cm

0.08ˢ/N٬cm

Yaw

0.17ˢ/N٬cm

0.10ˢ/N٬cm

0.35ˢ/N٬cm

0.08ˢ/N٬cm

0.07ˢ/N٬cm

Roll

0.12ˢ/N٬cm

0.06ˢ/N٬cm

0.21ˢ/N٬cm

0.05ˢ/N٬cm

0.03ˢ/N٬cm

Lost motion

Within 1.0μm

Within 1.0μm

Within 2.5μm

Within 2.5μm

Within 1.0μm

BacklashWithin 0.5μm

Within 0.5μm

‫٭‬

‫٭‬

Within 0.5μm

Straightness

Within 1.0μm

Within 1.0μm

Within 10μm

Within 10μm

Within 1.0μm

Parallelism

Within 15μm

Within 15μm

Within 20μm

Within 20μm

Within 15μm

Motion parallelism

Within 5μm

Within 5μm

‫٭‬

‫٭‬

Within 5μm

Pitching

Within 15ˢ

Within 15ˢ

Within 30ˢ

Within 35ˢ

Within 15ˢ

YawingWithin 10ˢ

Within 10ˢ

Within 25ˢ

Within 30ˢ

Within 10ˢ

Momentstiffness

Cable type
SensorD214-2-ӗӗ

D214-2-ӗӗ

D214-2-ӗӗ

D214-2-ӗӗ

D214-2-ӗӗ

Limit sensor

Installed

Installed

Installed

Installed

Installed

Origin sensor

Installed

Installed

Installed

Installed

Installed

Slit origin sensor

Installed

Installed

‫٭‬

‫٭‬

Installed

PG615

˥Cable model for standard motor. Cable model may be changed when you select other motor type. Please refer detailed production page.

PG413

PG513

KXT04015

KXT06015

Opposite hand

Option

Ӱ

Ӱ

Ӱ

Ӱ

Ӱ

Sensor voltage

DC5V/24V Selectable

DC5V/24V SelectableDC5 ֐ 24V

DC5 ֐ 24V

DC5V/24V Selectable

Limit sensor

Selectable

Selectable

N.C.

N.C.

Selectable

Origin sensor

Selectable

Selectable

N.C.

N.C.

Selectable

Slit origin sensor

Selectable

Selectable

‫٭‬

‫٭‬

Selectable

High-torque

Ӱ

Ӱ

‫٭‬

‫٭‬

Ӱ

High resolution

Ӱ

Ӱ

‫٭‬

‫٭‬

Ӱ

With brake

Ӱ

Ӱ

‫٭‬

‫٭‬

Ӱ

ę step

Ӱ

Ӱ

‫٭‬

‫٭‬

Ӱ

AC servo

Ӱ

Ӱ

‫٭‬

‫٭‬

Ӱ

Clean grease standard(except bearing part)

‫٭‬

‫٭‬

‫٭‬

‫٭‬

‫٭‬

Page

P.1-021

P.1-021

P.1-017

P.1-017

P.1-021

Sensor
logic

Motor

˥is uncovered the guarantee and no standard.

1

007

[Travel length–20mm]
KXC04015

Mechanicalspecification

PG715

KXG06020

KXC06020

The photo shows ӗPG615

Travel length

15mm

15mm

20mm

20mm

Table size

40×40mm70×70mm

60×60mm

60×60mmFeed screw (Ball screw)Į6 lead 1

Į6 lead 1

Į8 lead 1

Į8 lead 1

Guide

Crossed roller

Linear ballLinear ball

Crossed roller

StainlessStainlessMain materials

Aluminum

Aluminum

Finishing

Black almite finishing

Full length

102.5mm172.5mm

116mm

114mm

Full width

40mm

86.8mm

60mm

60mm

Stage thickness

30mm

20mm

30mm

30mm

Weight0.31kg0.90kg0.78kg0.44kgAccuracy
specification

Opposite side of the end face finishing Opposite side of the end face finishing

Black almite finishing

KXC04015

PG715

KXG06020

KXC06020

Full/Half

2μm/1μm

2μm/1μm

2μm/1μm

2μm/1μm

Resolution Micro step
(1/20 split)

0.1μm

0.1μm

0.1μm

0.1μm

MAX speed

10mm/sec

10mm/sec

20mm/sec

20mm/sec

Uni-directional positioning accuracy

Within 10μm

Within 6μm

Within 5μm

Within 5μm

Repeatability positioning accuracy

Within ±0.5μm

Within ±0.5μm

Within ±0.5μm

Within ±0.3μm

5kgf [49N]

10kgf [98N]

5kgf [49N]

5kgf [49N]

Pitch

0.33ˢ/N٬cm

0.03ˢ/N٬cm

0.08ˢ/N٬cm

0.15ˢ/N٬cm

Yaw

0.44ˢ/N٬cm

0.03ˢ/N٬cm

0.05ˢ/N٬cm

0.12ˢ/N٬cm

Roll

0.37ˢ/N٬cm

0.01ˢ/N٬cm

0.05ˢ/N٬cm

0.07ˢ/N٬cm

Lost motion

Within 1μm

Within 1μm

Within 1μm

Within 1μm

BacklashWithin 0.5μm

Within 0.5μm

Within 1.0μm

Within 0.5μm

Load capacity
Momentstiffness

Straightness

Within 3μm

Within 1μm

Within 3μm

Within 3μm

Parallelism

Within 30μm

Within 15μm

Within 15μm

Within 30μm

Motion parallelism

Within 10μm

Within 5μm

Within 10μm

Within 10μm

Pitching

Within 25ˢ

Within 15ˢ

Within 20ˢ

Within 20ˢ

YawingWithin 20ˢ

Within 10ˢ

Within 15ˢ

Within 15ˢ

Cable type
Sensor

Selection Guide

Motorized Stage

Intensive
comparison

D214-2-ӗӗ

D214-2-ӗӗ

D214-2-ӗӗ

D214-2-ӗӗ

Limit sensor

Installed

Installed

Installed

Installed

Origin sensor

Installed

Installed

Installed

Installed

Slit origin sensor‫٭‬Installed

‫٭‬

‫٭‬

˥Cable model for standard motor. Cable model may be changed when you select other motor type. Please refer detailed production page.

KXC04015

PG715

KXG06020

Opposite hand

Option

‫٭‬

Ӱ

‫٭‬

‫٭‬

Sensor voltage

DC5֐24V

DC5V/24V SelectableDC5֐24V

DC5֐24V

Sensor
logic

Motor

KXC06020

Limit sensor

N.C.

Selectable

N.C.

N.C.

Origin sensor

N.C.

Selectable

N.C.

N.C.

Slit origin sensor‫٭‬

Selectable

‫٭‬

‫٭‬

High-torque

‫٭‬

Ӱ

Ӱ

Ӱ
Ӱ

High resolution

‫٭‬

Ӱ

Ӱ

With brake

‫٭‬

Ӱ

Ӱ

‫٭‬

ę Step

Ӱ

Ӱ

Ӱ

Ӱ
‫٭‬

AC servo

‫٭‬

Ӱ

‫٭‬

Clean grease standard(except bearing part)

‫٭‬

‫٭‬

Ӱ

‫٭‬

Page

P.1-083

P.1-021

P.1-041

P.1-083˥is uncovered the guarantee and no standard.

1008

Motorized Stage

Stage Selection Guide
Motorized Stage

Selection Guide

Intensive
comparison[Travel length–30mm]
KX0725C

Mechanicalspecification

PG430

The photo shows ӗPG650

PG530

KXL06030

KXG06030

The photo shows ӗPG650

Travel length

25mm

30mm

30mm

30mm

30mm

Table size

70×70mm

40×60mm

50×70mm

60×60mm

60×70mmFeed screw (Ball screw)Į6 lead 1

Į6 lead 1

Į6 lead 1

Į8 lead 1 (2)Į8 lead 1

Guide

Crossed roller

Linear ballLinear ballLinear ballLinear ball

StainlessStainlessStainlessStainlessMain materials
FinishingAluminum
White almite finish

Opposite side of the end face finishing Opposite side of the end face finishing Opposite side of the end face finishing Opposite side of the end face finishing

Weight ( ) With cover type

1.0kg

0.6kg

0.78kg1.28 (1.34) kg

0.9kg

Full length ( ) With cover type

197mm

171mm

181mm

198 (203) mm

131mm

Full width

88.5mm

56.8mm

66.8mm

60mm

60mm

Stage thickness ( ) With cover type

21mm

20mm

20mm

30 (33) mm

30mm

Accuracy
specification

KX0725C

PG430

PG530

KXL06030

KXG06030

Full/Half

1μm/0.5μm

2μm/1μm

2μm/1μm

2μm/1μm (4μm/2μm)

2μm/1μm

0.05μm

0.1μm

0.1μm

0.1μm (0.2μm)

0.1μm

Resolution( ) means
Micro step
lead 2(1/20 split)
MAX speed ( ) means lead 2

10mm/sec

10mm/sec

10mm/sec

30mm/sec (35mm/sec)

20mm/sec

Uni-directional positioning accuracy

Within 5μm

Within 12μm

Within 12μm

Within 5μm

Within 5μm

Repeatability positioning accuracy±0.3μm

±0.5μm

±0.5μm

±0.5μm

±0.5μmLoad capacity

10kg [98N]

10kg [98N]

10kg [98N]

12kg [117.6N]

5kg [49N]

Pitch

0.09ˢ/N٬cm

0.24ˢ/N٬cm

0.12ˢ/N٬cm

0.05ˢ/N٬cm

0.08ˢ/N٬cm

Yaw

0.07ˢ/N٬cm

0.18ˢ/N٬cm

0.13ˢ/N٬cm

0.05ˢ/N٬cm

0.05ˢ/N٬cm

Roll

0.07ˢ/N٬cm

0.26ˢ/N٬cm

0.1ˢ/N٬cm

0.05ˢ/N٬cm

0.05ˢ/N٬cm

Lost motion

Within 1μm

Within 1μm

Within 1μm

Within 1μm

Within 1μm

BacklashWithin 0.5μm

Within 0.5μm

Within 0.5μm

Within 1μm

Within 1μm

Straightness

Within 1μm

Within 2μm

Within 2μm

Within 3μm

Within 3μm

Parallelism

Within 30μm

Within 15μm

Within 15μm

Within 15μm

Within 15μm

Motion parallelism

Within 10μm

Within 10μm

Within 10μm

Within 10μm

Within 10μm

Pitching

Within 20ˢ

Within 20ˢ

Within 20ˢ

Within 20ˢ

Within 20ˢ

YawingWithin 15ˢ

Within 15ˢ

Within 15ˢ

Within 15ˢ

Within 15ˢ

Momentstiffness

Cable type
SensorD214-2-ӗӗ

D214-2-ӗӗ

D214-2-ӗӗ

D214-2-ӗӗ

D214-2-ӗӗ

Limit sensor

Installed

Installed

Installed

Installed

Installed

Origin sensor

Installed

Installed

Installed

OptionInstalled

Slit origin sensor

Installed

Installed

Installed

‫٭‬

‫٭‬

KXG06030

˥Cable model for standard motor. Cable model may be changed when you select other motor type. Please refer detailed production page.

KX0725C

PG430

PG530

KXL06030

Opposite hand

Option

Ӱ

Ӱ

Ӱ

‫٭‬

‫٭‬

Sensor voltage

DC5֐24V

DC5V/24V Selectable

DC5V/24V SelectableDC5֐24V

DC5֐24V

Limit sensor
Sensorlogic

Selectable

Selectable

N.C.

N.C.

Origin sensor Switchable (Factory preset mode N.C.)

N.C.

Selectable

Selectable

N.C.

N.C.

Slit origin sensor Switchable (Factory preset mode N.C.)

Selectable

Selectable

‫٭‬

‫٭‬

High-torque

‫٭‬

Ӱ

Ӱ

Ӱ

Ӱ

High resolution

Standard

Ӱ

Ӱ

Ӱ

Ӱ

With brake

‫٭‬

Ӱ

Ӱ

Ӱ

Ӱ

ę Step

‫٭‬

Ӱ

Ӱ

Ӱ

Ӱ

AC servo

‫٭‬

Ӱ

Ӱ

Ӱ

‫٭‬

Clean grease standard(except bearing part)

‫٭‬

‫٭‬

‫٭‬

Ӱ

Ӱ

Page

P.1-093P.1-025

P.1-025

P.1-055

P.1-041Motor˥means "no guarantee, not available as a standard".

1009

Selection Guide

Motorized Stage

Intensive
comparison[Travel length–30mm]
KS101-30

KX0830C

KS102-30

Mechanicalspecification
Travel length

30mm

30mm

30mm

Table size

60×70mm

80×80mm

80×80mmFeed screw (Ball screw)

Į8 lead 1

Į8 lead 1

Į8 lead 1

Guide

Crossed roller

Crossed roller

Crossed roller

Main materials
FinishingAluminum

Aluminum

AluminumBlack almite finishing

Black almite finishing

Black almite finishing

Weight0.56kg

1.2kg

1.4kg

Full length

136mm

212mm

194.5mm

Full width

80.5mm

98.5mm

96mm

Stage thickness

30mm

26mm

46mm

KS101-30

KX0830C

KS102-302μm/1μm

1μm/0.5μm

1μm/0.5μm

0.05μm

0.05μm

Accuracy
specification
Full/Half

Resolution Micro step 0.05μm resolutin when select(1/20 split)a microstep motor
MAX speed

20mm/sec

10mm/sec

10mm/sec

Uni-directional positioning accuracy

Within 5μm

Within 5μm

Within 5μm

Repeatability positioning accuracy±0.3μm±0.3μm±0.3μmLoad capacity

5kg [49N]

15kg [147N]

20kg [196N]

Pitch

0.15ˢ/N٬cm

0.05ˢ/N٬cm

0.07ˢ/N٬cm

Yaw

0.08ˢ/N٬cm

0.04ˢ/N٬cm

0.06ˢ/N٬cm

Roll

0.07ˢ/N٬cm

0.03ˢ/N٬cm

0.02ˢ/N٬cm

Lost motion

Within 1μm

Within 1μm

Within 1μm

BacklashWithin 0.5μm

Within 0.5μm

Within 0.5μm

Momentstiffness

Straightness

Within 3μm

Within 1μm‫٭‬Parallelism

Within 30μm

Within 30μm

Within 30μm

Motion parallelism

Within 10μm

Within 10μm

Within 10μm

Pitching

Within 25ˢ

Within 20ˢ

Within 25ˢ

YawingWithin 20ˢ

Within 15ˢ

Within 15ˢ

Cable typeD214-2-ӗӗ

D214-2-ӗӗ

D214-1-ӗӗLimit sensor

Installed

Installed

Installed

Origin sensor

Installed

Installed

Installed

Slit origin sensor‫٭‬Installed

Installed

Sensor˥Cable model for standard motor. Cable model may be changed when you select other motor type. Please refer detailed production page.

KS101-30

KX0830C

Opposite hand

OptionӰӰӰSensor voltage

DC5֐24V

DC5֐24V

DC5֐24V

Sensor
logic

Motor

KS102-30

Limit sensor

N.C.

N.C.

N.C.

Origin sensor

N.C.

Switchable (Factory preset mode N.C.)

N.C.
N.C.

Slit origin sensor‫٭‬

Switchable (Factory preset mode N.C.)

High-torque

‫٭‬

‫٭‬

‫٭‬

High resolutionӰStandard

Standard

With brake

‫٭‬

‫٭‬

‫٭‬

ę StepӰ‫٭‬Ӱ

AC servo

‫٭‬

‫٭‬

‫٭‬

Clean grease as a standard(except bearing part)

‫٭‬

‫٭‬

‫٭‬

Page

P.1-101

P.1-093

P.1-109

˥is uncovered the guarantee and no standard.

1

010

Motorized Stage

Stage Selection Guide
Motorized Stage

Selection Guide

Intensive
comparison[Travel length–50mm]
KX1040C

KXL06050

PG650

Travel length

40mm

50mm

50mm

50mm

50mm

Table size

100×100mm

60×60mm

60×100mm

70×110mm

120×120mm

Feed screw (Ball screw)

Į8 lead 1

Į8 lead 1 (2)Į6 lead 1

Į6 lead 1

Į8 lead 1

Guide

Crossed roller

Linear ballLinear ballLinear ball

Crossed roller

StainlessStainlessStainless

Mechanicalspecification

Main materials
Finishing

PG750

KX1250C

The photo shows ӗPG650

AluminumBlack almite finishing

Opposite side of the end face finishing Opposite side of the end face finishing Opposite side of the end face finishingAluminumBlack almite finishing

Weight ( ) With cover type

1.6kg

1.40 (1.44) kg

1.08kg1.16kg2.2kg

Full length ( ) With cover type

237mm

218 (223) mm

220mm

230mm

263mm

Full width

114.5mm

60mm

76.8mm

86.8mm134.5mmStage thickness ( ) With cover type

30mm

30 (33) mm

20mm

20mm

35mm

Accuracy
specification

KX1040C

KXL06050

PG650

PG750

KX1250C

1μm/0.5μm

2μm/1μm(4μm/2μm)

2μm/1μm

2μm/1μm

1μm/0.5μm

0.05μm0.1 (0.2) μm

0.1μm

0.1μm

0.05μmMAX speed( ) means lead 2

10mm/sec

30mm (35mm) /sec

10mm/sec

10mm/sec

10mm/sec

Uni-directional positioning accuracy

Within 5μm

Within 5μm

Within 12μm

Within 12μm

Within 5μm

Repeatability positioning accuracy±0.3μm

±0.5μm

±0.5μm

±0.5μm±0.3μm20kg [196N]

12kg [117.6N]

10kg [98N]

10kg [98N]

25kg [245N]

Pitch

0.04ˢ/N٬cm

0.05ˢ/N٬cm

0.05ˢ/N٬cm

0.03ˢ/N٬cm

0.03ˢ/N٬cm

Yaw

0.04ˢ/N٬cm

0.05ˢ/N٬cm

0.05ˢ/N٬cm

0.03ˢ/N٬cm

0.02ˢ/N٬cm

Roll

0.02ˢ/N٬cm

0.05ˢ/N٬cm

0.05ˢ/N٬cm

0.03ˢ/N٬cm

0.02ˢ/N٬cm

Lost motion

Within 1μm

Within 1μm

Within 1μm

Within 1μm

Within 1μm

BacklashWithin 0.5μm

Within 1μm

Within 0.5μm

Within 0.5μm

Within 0.5μm

Full/Half
Resolution( ) meanslead 2
Micro step
(1/20 split)

Load capacity
Momentstiffness

Straightness

Within 1μm

Within 3μm

Within 2μm

Within 2μm

Within 1μm

Parallelism

Within 30μm

Within 15μm

Within 15μm

Within 15μm

Within 30μm

Motion parallelism

Within 15μm

Within 10μm

Within 10μm

Within 10μm

Within 15μm

Pitching

Within 20ˢ

Within 20ˢ

Within 20ˢ

Within 20ˢ

Within 20ˢ

YawingWithin 15ˢ

Within 15ˢ

Within 15ˢ

Within 15ˢ

Within 15ˢ
D214-2-ӗӗCable type
SensorD214-2-ӗӗ

D214-2-ӗӗ

D214-2-ӗӗ

D214-2-ӗӗ

Limit sensor

Installed

Installed

Installed

Installed

Installed

Origin sensor

Installed

OptionInstalled

Installed

Installed

Slit origin sensor

Installed‫٭‬

Installed

Installed

Installed

KX1250C˥Cable model for standard motor. Cable model may be changed when you select other motor type. Please refer detailed production page.

KX1040C

KXL06050

PG650

PG750

Opposite hand

OptionInstalled

Installed

Installed

Installed

Installed

Sensor voltage

DC5֐24V

DC5֐24V

DC5֐24V

DC5֐24V

DC5֐24V

Limit sensor
Sensorlogic

N.C.

Selectable

Selectable

N.C.

Origin sensor Switchable (Factory preset mode N.C.)

N.C.

N.C.

Selectable

Selectable

Switchable (Factory preset mode N.C.)
Switchable (Factory preset mode N.C.)

Slit origin sensor Switchable (Factory preset mode N.C.)‫٭‬

Selectable

Selectable

High-torque

‫٭‬

Ӱ

Ӱ

Ӱ

‫٭‬

High resolution

StandardӰӰӰStandard

With brake

‫٭‬

Ӱ

Ӱ

Ӱ

‫٭‬

ę Step

‫٭‬

Ӱ

Ӱ

Ӱ

‫٭‬

AC servo

‫٭‬

Ӱ

Ӱ

Ӱ

‫٭‬

Clean grease standard(except bearing part)

‫٭‬

Ӱ

‫٭‬

‫٭‬

‫٭‬

Page

P.1-093P.1-055

P.1-025

P.1-025

P.1-093Motor˥is uncovered the guarantee and no standard.

1011

Selection Guide

Motorized Stage

Intensive
comparison[Travel length–100mm]
KXL06075

KS102-70

KXL06100

KS102-100

KXS18100

Mechanicalspecification
Travel length

75mm

70mm

100mm

100mm

100mm

Table size

60×60mm

80×130mm

60×60mm

80×160mm

180×180mm

Feed screw (Ball screw)

Į8 lead 1 (2)Į8 lead 1

Į8 lead 2

Į8 lead 1

Į15 lead 5 (10)Guide

Linear ball

Crossed roller

Linear ball

Crossed roller

Slide guide

Main materials

Stainless

Aluminum

Stainless

Aluminum

Aluminum

Opposite side of the end face finishing

Black almite finishing

Opposite side of the end face finishing

Black almite finishing

Black almite finishing

Finishing
Weight ( ) With cover type1.54 (1.60) kg

1.8kg

1.80 (1.86) kg

2.1kg

8.32 (8.12) kg

Full length ( ) With cover type

243 (248) mm

244.5mm

287.5 (292.5) mm

274.5mm401.5mm

60mm

96mm

60mm

96mm

180mm

Stage thickness ( ) With cover type

30 (33) mm

46mm

30 (33) mm

46mm

75mm

Accuracy
specification

KXL06075

KS102-70

KXL06100

KS102-100

KXS18100

Full/Half

Lead 1mm: 2μm/1μm
Lead 2mm: 4μm/2μm

1μm/0.5μm

4μm/2μm

1μm/0.5μm

lead 5mm: 10μm/5μm
lead 10mm: 20μm/10μm

Micro step
(1/20 split)

Lead 1mm: 0.1μm
Lead 2mm: 0.2μm

0.05μm0.2μm0.05μmlead 5mm: 0.5μm
lead 10mm: 1μm

Lead 1mm: 30mm/sec
Lead 2mm: 35mm/sec

10mm/sec

45mm/sec

10mm/sec

lead 5mm: 30mm/sec
lead 10mm: 50mm/sec

Uni-directional positioning accuracy

Within 7μm

Within 5μm

Within 10μm

Within 10μm

Within 15μm

Repeatability positioning accuracy±0.5μm±0.3μm

±0.5μm±0.3μmWithin ±1μm

Full width

Resolution

MAX speed

Load capacity

12kg [117.6N]

20kg [196N]

12kg [117.6N]

20kg [196N]

30kgf [294N]

Pitch

0.05ˢ/N٬cm

0.01ˢ/N٬cm

0.05ˢ/N٬cm

0.005ˢ/N٬cm

0.005ˢ/N٬cm

Yaw

0.05ˢ/N٬cm

0.014ˢ/N٬cm

0.05ˢ/N٬cm

0.011ˢ/N٬cm

0.008ˢ/N٬cm

Roll

0.05ˢ/N٬cm

0.01ˢ/N٬cm

0.05ˢ/N٬cm

0.008ˢ/N٬cm

0.003ˢ/N٬cm

Lost motion

Within 1μm

Within 1μm

Within 1μm

Within 1μm‫٭‬BacklashWithin 1μm

Within 0.5μm

Within 1μm

Within 0.5μm

Within 2μm

Momentstiffness

Straightness

Within 3μm‫٭‬Within 5μm‫٭‬Within 10μm

Parallelism

Within 15μm

Within 30μm

Within 15μm

Within 30μm

Within 50μm

Motion parallelism

Within 10μm

Within 15μm

Within 10μm

Within 15μm

Within 20μm

Pitching

Within 20ˢ

Within 25ˢ

Within 25ˢ

Within 25ˢ

Within 30ˢ

YawingWithin 15ˢ

Within 20ˢ

Within 20ˢ

Within 20ˢ

Within 20ˢ

Cable type
SensorD214-2-ӗ

D214-1-ӗӗ

D214-2-ӗ

D214-1-ӗӗ

D214-1-ӗӗLimit sensor

Installed

Installed

Installed

Installed

Installed

Origin sensor

OptionInstalled

OptionInstalled

Installed

Slit origin sensor‫٭‬Installed‫٭‬

Installed

Installed

KXS18100

˥Cable model for standard motor. Cable model may be changed when you select other motor type. Please refer detailed production page.

KXL06075

KS102-70

KXL06100

KS102-100

Opposite hand

Option

‫٭‬

Ӱ

‫٭‬

Ӱ

‫٭‬

Sensor voltage

DC5֐24V

DC5֐24V

DC5֐24V

DC5֐24V

DC5֐24V

Sensorlogic

Limit sensor

N.C.

N.C.

N.C.

N.C.

N.C.

Origin sensor

N.C.

N.C.

N.C.

N.C.

N.C.

Slit origin sensor

‫٭‬

N.C.

‫٭‬

N.C.

N.C.

High-torqueӰ‫٭‬Standard‫٭‬Standard

High resolutionӰStandardӰStandard‫٭‬With brake

Ӱ

‫٭‬

Ӱ

‫٭‬

Ӱ

ę Step

Ӱ

Ӱ

Ӱ

Ӱ

Ӱ

AC servo

Ӱ

‫٭‬

Ӱ

‫٭‬

Ӱ

Clean grease standard(except bearing part)

Ӱ

‫٭‬

Ӱ

‫٭‬

Ӱ

Page

P.1-055

P.1-109

P.1-059

P.1-109

P.1-123Motor˥is uncovered the guarantee and no standard.

1

012

Motorized Stage

Stage Selection Guide
Motorized Stage

Selection Guide

Intensive
comparison[Travel length–500mm]
KXL06150

KXL06200

KXS18200

KXL06300

Mechanicalspecification
Travel length

150mm

200mm

200mm

300mm

Table size

60×60mm

60×60mm

180×180mm

60×60mmFeed screw (Ball screw)

Į8 lead 2

Į8 lead 2

Į15 lead 5 (10)

Į8 lead 2

GuideLinear ballLinear ballSlide guideLinear ball

StainlessStainlessMain materials
Finishing

Opposite side of the end face finishing Opposite side of the end face finishingAluminum

StainlessBlack almite finishing

Opposite side of the end face finishing

Weight ( ) With cover type2.10 (2.16) kg

2.42 (2.48) kg

9.48 (9.37) kg

3.02 (3.12) kg

Full length ( ) With cover type337.5 (342.5) mm

387.5 (392.5) mm

501.5mm

487.5 (492.5) mm

60mm

60mm

180mm

60mm

Stage thickness ( ) With cover type

Full width

30 (33) mm

30 (33) mm

75mm

30 (33) mm

Accuracy
specification

KXL06150

KXL06200

KXS18200

KXL06300

Full/Half

4μm/2μm

4μm/2μm

lead 5mm: 10μm/5μm
lead 10mm: 20μm/10μm

4μm/2μm

Micro step
(1/20 split)

0.2μm

0.2μm

0.5 (1) μm

0.2μm

MAX speed

45mm/sec

45mm/sec

30mm (50mm) /sec

45mm/sec

Uni-directional positioning accuracy

Within 15μm

Within 15μm

Within 20μm

Within 20μm

Repeatability positioning accuracy±0.5μm

±0.5μm±1μm±0.5μm12kg [117.6N]

12kg [117.6N]

30kg [294N]

12kg [117.6N]

Pitch

0.05ˢ/N٬cm

0.05ˢ/N٬cm

0.005ˢ/N٬cm

0.05ˢ/N٬cm

Yaw

0.05ˢ/N٬cm

0.05ˢ/N٬cm

0.008ˢ/N٬cm

0.05ˢ/N٬cm

Roll

0.05ˢ/N٬cm

0.05ˢ/N٬cm

0.003ˢ/N٬cm

0.05ˢ/N٬cm

Lost motion

Within 1μm

Within 1μm‫٭‬Within 1μm

BacklashWithin 1μm

Within 1μm

Within 2μm

Within 1μm

Straightness

Within 5μm

Within 7μm

Within 15μm

Within 7μm

Parallelism

Within 15μm

Within 15μm

Within 50μm

Within 15μm

Motion parallelism

Within 15μm

Within 20μm

Within 20μm

Within 25μm

Pitching

Within 25ˢ

Within 30ˢ

Within 50ˢ

Within 35ˢ

YawingWithin 20ˢ

Within 20ˢ

Within 20ˢ

Within 20ˢ

Resolution

Load capacity
Momentstiffness

Cable type
SensorD214-2-ӗ

D214-2-ӗ

D214-1-ӗ

D214-2-ӗ

Limit sensor

Installed

Installed

Installed

Installed

Origin sensor

OptionOptionInstalled

OptionSlit origin sensor

‫٭‬

‫٭‬

Installed‫٭‬˥Cable model for standard motor. Cable model may be changed when you select other motor type. Please refer detailed production page.

KXL06150

KXL06200

KXS18200

Opposite hand

Option

‫٭‬

‫٭‬

‫٭‬

‫٭‬

Sensor voltage

DC5֐24V

DC5֐24V

DC5֐24V

DC5֐24V

Sensorlogic

Limit sensor

N.C.

N.C.

N.C.

N.C.

Origin sensor

N.C.

N.C.

N.C.

N.C.

Slit origin sensor

‫٭‬

‫٭‬

‫٭‬

‫٭‬

High-torqueStandard

Standard

Standard

Standard

High resolution

Ӱ

Ӱ

‫٭‬

Ӱ

With brake

Ӱ

Ӱ

Ӱ

Ӱ

ę stepӰӰӰӰAC servo

Ӱ

Ӱ

Ӱ

Ӱ

Clean grease standard(except bearing part)

Ӱ

Ӱ

Ӱ

Ӱ

Page

P.1-059

P.1-063

P.1-123

P.1-063Motor˥is uncovered the guarantee and no standard.

1013

KXL06300

Selection Guide

Motorized Stage

Intensive
comparison[Travel length–500mm]
KXS18300

KXS18400

KXS18500

Mechanicalspecification
Travel length

300mm

400mm

500mm

Table size

180×180mm

180×180mm

180×180mm

Feed screw (Ball screw)

Į15 lead 5 (10)

Į15 lead 5 (10)

Į15 lead 5 (10)Guide

Slide guide

Slide guide

Slide guide

Main materials

Aluminum

Aluminum

AluminumBlack almite finishing

Black almite finishing

Black almite finishing

Finishing

10.72 (10.70) kg

11.92 (11.99) kg

13.10 (13.26) kg

Full length

Weight ( ) With cover type601.5mm701.5mm

801.5mm

Full width

180mm

180mm

180mm

Stage thickness

75mm

75mm

75mm

KXS18300

KXS18400

KXS18500

Full/Halflead 5mm: 10μm/5μm
lead 10mm: 20μm/10μm

lead 5mm: 10μm/5μm
lead 10mm: 20μm/10μm

lead 5mm: 10μm/5μm
lead 10mm: 20μm/10μm

Micro step
(1/20 split)

0.5μm (1μm)

0.5μm (1μm)

0.5μm (1μm)

MAX speed

30mm/sec(50mm/sec)

30mm/sec(50mm/sec)

30mm/sec(50mm/sec)

Uni-directional positioning accuracy

Within 30μm

Within 35μm

Within 40μm

Repeatability positioning accuracy

±1μm

±1μm

±1μm

30kg [294N]

30kg [294N]

30kg [294N]

Pitch

0.005ˢ/N٬cm

0.005ˢ/N٬cm

0.005ˢ/N٬cm

Yaw

0.008ˢ/N٬cm

0.008ˢ/N٬cm

0.008ˢ/N٬cm

Roll

0.003ˢ/N٬cm

0.003ˢ/N٬cm

0.003ˢ/N٬cm

Lost motion

‫٭‬

‫٭‬

‫٭‬

BacklashWithin 2μm

Within 2μm

Within 2μm

Straightness

Within 20μm

Within 25μm

Within 30μm

Parallelism

Within 50μm

Within 50μm

Within 50μm

Motion parallelism

Within 30μm

Within 30μm

Within 30μm

Pitching

Within 60ˢ

Within 60ˢ

Within 70ˢ

YawingWithin 30ˢ

Within 30ˢ

Within 30ˢ

Cable typeD214-1-ӗ

D214-1-ӗ

D214-1-ӗLimit sensor

Installed

Installed

Installed

Origin sensor

Installed

Installed

Installed

Slit origin sensor

Installed

Installed

Installed

Accuracy
specification
Resolution

Load capacity
Momentstiffness

Sensor˥Cable model for standard motor. Cable model may be changed when you select other motor type. Please refer detailed production page.

KXS18300

KXS18400

Opposite hand

Option

‫٭‬

‫٭‬

‫٭‬

Sensor voltage

DC5֐24V

DC5֐24V

DC5֐24V

Sensorlogic

KXS18500

Limit sensor

N.C.

N.C.

N.C.

Origin sensor

N.C.

N.C.

N.C.

Slit origin sensor

N.C.

N.C.

N.C.

High-torqueStandard

Standard

Standard

High resolution

‫٭‬

‫٭‬

‫٭‬

With brake

ӽ

ӽ

ӽ

ę stepӽӽӽ

AC servoӽӽӽ

Clean grease standard(except bearing part)

ӽ

ӽ

ӽ

Page

P.1-123

P.1-127

P.1-127Motor˥is uncovered the guarantee and no standard.

1014