文部科学省ナノテクノロジープラットフォーム

第17回ナノテクノロジー
総合シンポジウム“Nanotechnology, the basis for realizing super smart society (Society 5.0)”

Proceedings
Date: February 1st(Fri), 2019
Venue: Tokyo Big Sight, Conference Tower(Tokyo)
Sponsored by
Nanotechnology Platform by the Ministry of Education, Culture, Sports,
Science and Technology (MEXT)
Center for Nanotechnology Platform, National Institute for Materials
Science (NIMS)
The Institutions, participating in the Nanotechnology Platform:
Hokkaido University, Chitose Institute of Science and Technology, Tohoku University,
University of Tsukuba, National Institute of Advanced Industrial Science and Technology,
The University of Tokyo, Tokyo Institute of Technology, Waseda University, Shinshu University,
National Institutes of Natural Sciences Institute for Molecular Science,
Nagoya University, Nagoya Institute of Technology, Toyota Technological Institute,
Kyoto University, Japan Advanced Institute of Science and Technology,
Nara Institute of Science and Technology, Osaka University, Japan Atomic Energy Agency,
National Institutes for Quantum and Radiological Science and Technology
Hiroshima University, Yamaguchi University, Kagawa University, Kyushu University,
Kitakyushu Foundation for the Advancement of Industry Science and Technology

文部科学省ナノテクノロジープラットフォーム

第回ナノテクノロジー
総合シンポジウム“Nanotechnology, the basis for realizing super smart society (Society 5.0)”

Proceedings
Date: February 1st (Fri), 2019
Venue: Tokyo Big Sight, Conference Tower (Tokyo)
Sponsored by
Nanotechnology Platform by the Ministry of Education, Culture, Sports,
Science and Technology (MEXT)
Center for Nanotechnology Platform, National Institute for Materials
Science (NIMS)
The Institutions, participating in the Nanotechnology Platform:
Hokkaido University, Chitose Institute of Science and Technology, Tohoku University,
University of Tsukuba, National Institute of Advanced Industrial Science and Technology,
The University of Tokyo, Tokyo Institute of Technology, Waseda University, Shinshu University,
National Institutes of Natural Sciences Institute for Molecular Science,
Nagoya University, Nagoya Institute of Technology, Toyota Technological Institute,
Kyoto University, Japan Advanced Institute of Science and Technology,
Nara Institute of Science and Technology, Osaka University, Japan Atomic Energy Agency,
National Institutes for Quantum and Radiological Science and Technology
Hiroshima University, Yamaguchi University, Kagawa University, Kyushu University,
Kitakyushu Foundation for the Advancement of Industry Science and Technology

February 1st (Fri.), 2019, Reception Hall2019年2月1日（金） 会議棟1階レセプションホール

10:00-10:10【Opening Remarks / 開会挨拶】
Kazuhito Hashimoto (President, National Institute for Materials Science, Japan)
橋本 和仁（物質・材料研究機構理事長）
Ministry of Education, Culture, Sports, Science and Technology/ 文部科学省

10:10-10:45【Plenary Lecture / 基調講演】
Yoshinao Mishima(The Chair, Committee on Nanotechnology and Materials Science, MEXT)

三島 良直（ナノテクノロジー・材料科学技術委員会

主査）“R&D Strategy for Nanotechnology/Materials Science toward Super Smart Society”「未来社会実現に向けたナノテクノロジー・材料分野の研究開発戦略」

10:45-11:15【Special Lecture / 特別講演】
Masayoshi Esashi (Tohoku University, Japan)
江刺 正喜（東北大学）“MEMS Toward Realizing Super Smart Society”「超スマート社会に向けた MEMS の実用化」

11:15-12:05【Session 1】
Sensor · Actuator / センサー・アクチュエーター
11:15 -Jin Kawakita (National Institute for Materials Science, Japan)
川喜多 仁（物質・材料研究機構）“R&D of sensors and actuators toward agriculture and healthcare applications”「農業とヘルスケアへの応用を目指したセンサ・アクチュエータの研究開発」

11:40 -

Kiichi Niitsu (Nagoya University, Japan)
新津 葵一（名古屋大学）“Nanotechnology-enabled Sub-nano-Watt Integrated Healthcare IoT~Stand-Alone Energy-Autonomous Continuous Blood Glucose Monitoring Contact Lenses ~”「ナノテク応用サブナノワット集積ヘルスケア IoT 〜単独動作可能・電力自立持続血糖モニタリングコンタクト〜」

12:05 - 13:05

Lunch / 昼食

13:05-13:30【Session 2】
nanotech 2018 award lecture / nano tech 大賞 2018 講演
13:05 -

Shinichi Yorozu (NEC Corporation, Japan)
萬 伸一（日本電気株式会社）“Nanotechnology in IoT era”
「IoT 時代のナノテクノロジー」

13:30-15:00【Session 3】
Overseas Nanotechnology User Facility Programs / 海外ナノテク共用事業紹介
13:30 -

Thirumalai Venky Venkatesan (National University of Singapore, Singapore)“Road to ultra-low switching Energy Memories to artificial neurons”「ニューラル電子デバイスへの道」

14:00 -

Peter J. Cumpson (University of New South Wales, Australia)“Open Access Analytical Services for Nanotechnology, with emphasis on Surface Analysis”「表面分析を基盤とした分析サービスのオープンアクセス環境」

14:30 -

Mitsuhiro Murayama (Virginia Tech, USA)
“Emerging understanding of anthropogenic and natural nanoparticle impacts on Earth systems– a new paradigm for earth science –”「人為的及び自然ナノ粒子の地球システムへの影響の新しい理解 −地球科学における新たなパラダイム−」

15:00 - 15:20

Coﬀee Break / 休憩

15:20-16:40【Session 4】
Characteristics of Facilities and their Applications in Nanotechnology Platform /ナノテクノロジープラットフォームの特徴的な技術とその応用
ナノテクノロジープラットフォームの特徴的な技術と利用事例等の紹介
15:20 -

Katsuaki Sato (Program Director for Nanotechnology Platform, MEXT)
佐藤 勝昭（文部科学省ナノテクノロジープラットフォーム プログラムディレクター）“Toward further development of nanotechnology platform”「ナノテクノロジープラットフォームのさらなる発展をめざして」

15:40 -

Kanako Inoue (Osaka University)
井上 加奈子（大阪大学 微細構造解析プラットフォーム）“Improvement of chemical fixation effect by oxygen nanobubble-Cytological analysis of Ralstonia solanacearum-”「酸素ナノバブルによる化学的固定効果の向上 − Ralstonia solanacearum の細胞学的解析−」

16:00 -

Yoshio Mita (The University of Tokyo)
三田 吉郎（東京大学 微細加工プラットフォーム）“More chance with Nanotechnology Platform: Next Generation MEMS R&D model”「失敗は成功の元 : ナノテクノロジープラットフォームで試して拓く先端集積 MEMS」

16:20 -

Masahiro Goto (Kyusyu University)
後藤 雅宏（九州大学 分子・物質合成プラットフォーム）“Biopharmaceutical Application of Nanotechnology –Development of Transdermal Vaccine –”「バイオ医薬品へのナノテクノロジーの応用 −塗るワクチン開発−」

16:40-16:45【Closing Remarks / 閉会挨拶】
Shigeo Tanuma(Chairperson of the Organizing Committee of JAPAN NANO 2019 / Director, Center for Nanotechnology Platform, National Institute for Materials Science, Japan)

田沼 繁夫（JAPAN NANO 2019 組織委員長、物質・材料研究機構ナノテクノロジープラットフォームセンター長）

Contents / 目次

Plenary Lecture / 基調講演
R&D Strategy for Nanotechnology/Materials Science toward Super Smart Society ………………………………… 10「未来社会実現に向けたナノテクノロジー・材料分野の研究開発戦略」
Yoshinao Mishima(The Chair, Committee on Nanotechnology and Materials Science, MEXT)

三島 良直（ナノテクノロジー・材料科学技術委員会

主査）

Special Lecture / 特別講演
MEMS Toward Realizing Super Smart Society ……………………………………………………………………… 32「超スマート社会に向けた MEMS の実用化」
Masayoshi Esashi (Tohoku University, Japan)
江刺 正喜（東北大学）

Session 1: Sensor · Actuator / センサー・アクチュエーター
R&D of sensors and actuators toward agriculture and healthcare applications ……………………………………… 48「農業とヘルスケアへの応用を目指したセンサ・アクチュエータの研究開発」
Jin Kawakita (National Institute for Materials Science, Japan)
川喜多 仁（物質・材料研究機構）
Nanotechnology-enabled Sub-nano-Watt Integrated Healthcare IoT~Stand-Alone Energy-Autonomous Continuous Blood Glucose Monitoring Contact Lenses ~ ……………………… 54「ナノテク応用サブナノワット集積ヘルスケア IoT 〜単独動作可能・電力自立持続血糖モニタリングコンタクト〜」
Kiichi Niitsu (Nagoya University, Japan)
新津 葵一（名古屋大学）

Session 2: nanotech 2018 award lecture / nano tech 大賞 2018 講演
Nanotechnology in IoT era …………………………………………………………………………………………… 64「IoT 時代のナノテクノロジー」
Shinichi Yorozu (NEC Corporation, Japan)
萬 伸一（日本電気株式会社）

Session 3: Overseas Nanotechnology User Facility Programs / 海外ナノテク共用事業紹介
Road to ultra-low switching Energy Memories to arti¿cial neurons ………………………………………………… 70「ニューラル電子デバイスへの道」
Thirumalai Venky Venkatesan (National University of Singapore, Singapore)

Open Access Analytical Services for Nanotechnology, with emphasis on Surface Analysis ………………………… 82「表面分析を基盤とした分析サービスのオープンアクセス環境」
Peter J. Cumpson (University of New South Wales, Australia)
Emerging understanding of anthropogenic and natural nanoparticle impacts on Earth systems– a new paradigm for earth science – ……………………………………………………………………………………100「人為的及び自然ナノ粒子の地球システムへの影響の新しい理解 −地球科学における新たなパラダイム−」
Mitsuhiro Murayama (Virginia Tech, USA)

Session 4: Characteristics of Facilities and their Applications in Nanotechnology Platform /ナノテクノロジープラットフォームの特徴的な技術とその応用
Toward further development of nanotechnology platform …………………………………………………………… 112「ナノテクノロジープラットフォームのさらなる発展をめざして」
Katsuaki Sato (Program Director for Nanotechnology Platform, MEXT)
佐藤 勝昭（文部科学省ナノテクノロジープラットフォーム プログラムディレクター）
Improvement of chemical ¿xation e൵ect by oxygen nanobubble–Cytological analysis of Ralstonia solanacearum– ……………………………………………………………………122「酸素ナノバブルによる化学的固定効果の向上 ­Ralstonia solanacearum の細胞学的解析­」
Kanako Inoue (Osaka University)
井上 加奈子（大阪大学 微細構造解析プラットフォーム）
More chance with Nanotechnology Platform: Next Generation MEMS R&D model ………………………………128「失敗は成功の元 : ナノテクノロジープラットフォームで試して拓く先端集積 MEMS」
Yoshio Mita (The University of Tokyo)
三田 吉郎（東京大学 微細加工プラットフォーム）
Biopharmaceutical Application of Nanotechnology –Development of Transdermal Vaccine– ………………………148「バイオ医薬品へのナノテクノロジーの応用 ­塗るワクチン開発­」
Masahiro Goto (Kyusyu University)
後藤 雅宏（九州大学 分子・物質合成プラットフォーム）

【Plenary Lecture / 基調講演】【Plenary Lecture / 基調講演】

“R&D Strategy for Nanotechnology/Materials Science toward
Super Smart Society”「未来社会実現に向けたナノテクノロジー・材料分野の研究開発戦略」

Yoshinao Mishima (The Chair, Committee on Nanotechnology and Materials Science, MEXT)
三島 良直（ナノテクノロジー・材料科学技術委員会 主査）

9未来社会実現に向けたナノテクノロジー・
材料分野の研究開発戦略(R&D Strategy for Nanotechnology/
Materials Science toward Super Smart Society)

三島 良直
文部科学省 科学技術・学術審議会 研究計画・評価分科会
ナノテクノロジー・材料科学技術委員会 主査

ナノテクノロジー・材料科学技術は、ライフサイエンスやエレクトロニクス、環境・エネルギーなど幅広い産業課題・社会課題を解決に導く分野横断的な基盤技術である。

近年、科学技術の更なる進展や AI/IoT/ ビッグデータの活用等により社会構造は大きく変化している。「第 5 期科学技術基本計画（平成 28 年１月）
」では、サイバーとフィジカ
ルが高度に融合する社会 Society5.0 の実現が目標として掲げられ、その後も政府の中長期的な大目標となっている。
また、世界に目を向ければ、国連サミットにて「持続可能な開発目標（Sustainable
Development Goals (SDGs)）」が採択され、人間と地球が調和する持続的な発展に向けた目
標の達成に向けて、我が国としても積極的な貢献が求められている。さらに、希少元素の確保等に向けた戦略的な対応方策が世界各国で検討されるなど、今後本分野における国際競争は一層激化することが予想される。
このように、社会変革や国際競争が急速に進む中で、Society5.0 や SDGs 等の中長期的な大目標達成に向け、ナノテクノロジー・材料科学技術に求められる役割は大きく、産学官が連携し戦略的に研究開発を進めていくべき時期を迎えている。

こうした状況を踏まえ、文部科学省 科学技術・学術審議会 研究計画・評価分科会ナノテクノロジー・材料科学技術委員会では、材料やデバイスをマテリアルという言葉でまとめ、未来社会実現への壁を打破しながら産業振興と人類の「幸せ」の両方に貢献する「マテリアルによる社会革命（マテリアル革命）」の実現を目標として掲げつつ、本分野にお10

いて今後重点的に取り組むべき課題等を中心に「ナノテクノロジー・材料科学技術 研究開発戦略（平成 30 年８月）」をとりまとめた。

本シンポジウムの場では、マテリアル開発の基礎力引上げとイノベーション創出の基盤強化に資する最先端設備・研究機器の共用に向けた取組（「ナノテクノロジープラット
フォーム」等）や研究開発の効率化・高速化・高度化の実現に向けた取組等を中心に、本研究戦略の概要について御説明する。

三島良直（みしま昭和54年10月
昭和56年５月
平成９年４月
平成23年10月
平成24年10月
平成27年３月

よしなお）

University of California, Berkeley, 材料科学専攻
Assistant Research Engineer
東京工業大学 助手 精密工学研究所
同教授
同理事・副学長（教育・国際担当）

同学長（平成30年３月まで）
ナノテクノロジー・材料科学技術委員会主査（現職）11౞ਟ঺ভৰਠप਱ऐञ
ॼঀॸॡঀট४‫؞ش‬౫મী৙भଢ଼஢৫৅ਅറ
਴ਛ‫ڭگ‬ফ‫ڮ‬া‫ڭ‬঩ધ৖ఐ৾੄ ఐ৾ૼ୒‫୒৾؞‬ଟ৮ভ ଢ଼஢ੑ઺‫؞‬௬੼ীఐভ
ॼঀॸॡঀট४‫؞ش‬౫મఐ৾ૼ୒੻৩ভ ਌ਪਕਣଐઉম঩भ൥౰৔ઍ
‫ॸঀॼ؝ڭ‬ॡঀট४‫؞ش‬౫મী৙॑਄ॉඕऎ૾யभ૗৲
‫؝ڮ‬০৏भ೑ऋবभॼঀॸॡঀট४‫؞ش‬౫મী৙भଢ଼஢৫৅ਅറभਫ਼ୈ, ॼঀॸॡঀট४‫؞ش‬౫મী৙भ௓ਤपਊञढथभ৯ఏध
੦ম৓ऩ५ॱথ५,, ঐॸজ॔ঝ୓୵भৰਠप਱ऐञୖ਻
,,,఻৬৓ऩ਄ੌ‫঺ ٳ‬ভ૗୓॑ुञैघྟৡ৓ऩਃચ॑੅णঐॸজ॔ঝभ൉ল‫୓ ٳ‬ৗ৓ঐॸজ॔ঝ਼॑पଛॉলघ१ॖग़থ५੦ೕभଡണ‫ ٳ‬ଢ଼஢৫৅भ஍૨৲‫؞‬ৈச৲‫؞‬ৈ২৲॑ৰਠघॊছ঎੝୓‫ ٳ‬ঐॸজ॔ঝ୓୵॑ৰਠघॊञीभ௓ਤ্ੁ
‫؝گ‬ऽधी
12ॼঀॸॡঀট४‫؞ش‬౫મী৙॑਄ॉඕऎ૾யभ૗৲

ऒोऽदभॼঀॸॡঀট४‫؞ش‬౫મఐ৾ૼ୒भ૽સ‫كڭق‬‫෇ઁ ٹ‬द੗஘ऩଢ଼஢୩ୠ‫ૢ؞‬৷ী৙੍॑इॊ੦ೕऊण‫ؚ‬ఐ৾ૼ୒ृ঺ভजभुभभ
৅னप਱ऐथৗञऩ૭ચਙ॑જॉิऌ‫ؚ‬੔଑घॊ૽સ
ॼঀॸॡঀট४‫؞ش‬౫મఐ৾ૼ୒म‫ؚ‬ग़ঞॡॺটॽॡ५‫ؚ‬ছॖই१ॖग़থ५‫ؚ‬୭୆‫؞‬ग़ॿঝॠ‫ش‬ಉ்ઁःਓ঵ୖ਻‫঺؞‬ভୖ਻॑ੰৠप଑ऎী৙૯૵৓ऩ੦ೕૼ୒‫؛‬ॼঀঞঋঝदभ৶૛‫ੰ؞‬ෲ‫؞‬਑౪॑ජೲ৓प୯੷ख‫୓ؚ‬ৗ৓ਃચ॑
੅ण౫મ॑ബइङ൉ଲघॊऒधऋ‫ؚ‬ઃ਼৻भਓ঵଼ଥৡभে୵଍‫؛‬೑ऋবमਓ঵पउःथ‫ؚ‬ৈःব੠଼ଥৡ॑
થघॊ‫୒৾؛‬पउःथम‫ॵॺؚ‬উঞঋঝ॑
೐੅खणणुৣఋൊ਱‫؛‬َ੪ಞ॑਑घॊ঻मਓ঵॑਑घ
ॊُम০ृ਼ੀभુৢੳ௙‫؛‬௎৪র஻धुবੇॖॽ३॔ॸॕঈभৣ‫ؚ‬৆ਿ਺ৱ॑੎ਡ৓पৰ઱‫؛‬
ഌຬ

୭୆

জ१ॖॡঝ
টॣॵॺग़থ४থभ
ൌ૘੪ಞभীෲ
ਦ౅ਙ௬੼ᚤ⣽ᵓ㐀ゎᯒ䞉ᚤ⣽ຍᕤୢ௜਍৸‫؞‬਍ੱ

੃৘‫؞‬ઐৢॖথ
ইছ

ਓ঵ૼ୒

खऩृऊऩ
যੵ෗

ఫ૬‫؞‬௩࿹হ௛
भਉ౤ੰෲଓఊ‫؞‬ଓਘ

ัအ‫ۋۉ‬भংॵॡছॖॺ

ॼঀॸॡ‫؞‬౫મఐ৾ૼ୒
᪂ᮦᩱ䛾๰ᡂ

ᛶ⬟ホ౯



13

ऒोऽदभॼঀॸॡঀট४‫؞ش‬౫મఐ৾ૼ୒भ૽સ‫كڮق‬೑ऋবभَੵ঵ಞ౫ُभୟল੕પपಚीॊસ়मঽ৿੤धధ॒द॑௭
इथउॉ‫ؚ‬೑ऋব ऋਘा॑થखਓ঵੦ೕ੍॑इॊ੎ਏী৙
মী৙भ৅னऋৎ৻൐पৗखः੼க॑൉লख‫঺ؚ‬ভभ૗৲॑Ꮛਬ

೑ऋবभਓ঵੦ೕ‫آ‬ฟ඾䠖㈈ົ┬ ㈠᫆⤫ィ䠄ᴫἣရ䠅䝘䝜䝔䜽䝜䝻䝆䞊䞉ᮦᩱศ㔝䛾◊✲㛤Ⓨᡓ␎᳨ウసᴗ㒊఍ 䠄➨㻟ᅇ䠅㈨ᩱ㻝䜘䜚ᢤ⢋䞉ຍᕤଢ଼஢৫৅୭୆भ૗৲
েਓফೡযઠ峘੖૘峕ൣ岮岝଄ুଢ଼஢঻峘ન৳岶୔峁岹峔峵ൊ਱೑岶ব峘ਊჾী৙峘૛ધਯ峘ব੠৓峔崟崏崊峘଩ৣਓ঵ੀ峑峙岝ৗ௪ব嵉嵤崓嵤峘૞ো峕峲峵଼ଥ峘ౕ৲ಉ峘峉峫岝৘ৃ崟崏崊峘଩ৣ峒ಞ౫ঽ৬峘崛嵊崯崋崮崋৲岶ਸச崯嵤崧ฌ৿஑౫મ৫৅峘ਤன峕峲峵崚嵤嵈崩崏嵛崠峘ৎ৻峕఍ো‫ق‬ল๕‫ك‬ધ৖ఐ৾੄ ఐ৾ૼ୒嵣৾୒৆ੁଢ଼஢ਚ岝ଢ଼஢૛ધ峕ା৯峁峉঩ম峘প৾嵁嵛崩嵆嵤崕嵛崘岝৹ਪৱમ岝ফা峼੦峕岝ધ৖ఐ৾੄岶ਸੵ嵣੿ਛ岞14⤒῭⏘ᴗ┬ሗ࿌᭩䛂⣲ᮦ⏘ᴗ䛻䛚䛡䜛䜲䝜䝧䞊䝅䝵䞁䛾ᙺ๭䛸ᮇᚅ䛃䜘䜚ᢤ⢋೑ऋবभ৆ੁ঱भਜ਼઼तऐ‫كڭق‬ࠎၬए݊нМЖиപφࠚࡖхപχࠚс଱ผ࿞ნкЩи‫ٲ‬൶ྩУ˻‫˺ုڒ‬പψࠚНћс‫܅‬൧ฆмࠎཌྷ࠷ଽр‫ڒ‬жкЩир‫ٲ‬൶ྩУн˻➨ϱᮇϮϬϭϲᖺ䡚ϮϬϮϬᖺ➨ϰᮇϮϬϭϭ䡚ϮϬϭϱᖺᗘ➨ϯᮇϮϬϬϲ䡚ϮϬϭϬᖺᗘ➨ϮᮇϮϬϬϭ䡚ϮϬϬϱᖺᗘ➨ϭᮇϭϵϵϲ䡚ϮϬϬϬᖺᗘ‫؞‬ਓ঵଼ଥৡभਘ৲प਱ऐञ
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੦ೕૼ୒धखथभॼঀॸॡ

੎ਡী৙धखथभॼঀॸॡ‫؞‬౫મ‫پ‬ਸ਼‫ڮ‬਋धਸ਼‫گ‬਋दमছॖই‫ؚ‬ੲਾ‫ؚ‬୭୆धુप੎ਡ‫ڰ‬ী৙भऱधण
೑ऋবभ৆ੁ঱भਜ਼઼तऐ‫كڮق‬➨䠑ᮇᇶᮏィ⏬䛻䛚䛔䛶䛿䚸➨䠐ᮇ䜘䜚ᑟධ䛧䛯䛂ㄢ㢟ゎỴᆺ䜰䝥䝻䞊䝏䛃䛻ຍ䛘䛂ᮍ᮶๰⏕ᆺ䜰䝥䝻䞊䝏䛃䛾⪃䛘䜢ᑟධ䚹≉䛻䝘䝜䝔䜽䝜䝻䝆䞊䞉ᮦᩱ⛉Ꮫ䛿䚸㉸䝇䝬䞊䝖♫఍䜢ᨭ䛘䜛䛂㔜せ䛺ᇶ┙ᢏ⾡䛃䛸䛧䛶఩⨨௜䛡䚹த५ঐ‫঺ॺش‬ভ૑ਏऩुभ‫؞‬१‫ش‬অ५॑‫ؚ‬૑ਏऩযप‫ؚ‬૑ਏऩৎप‫ؚ‬૑ਏऩटऐ઀୹ख‫঺ؚ‬ভभ஘‫ر‬ऩॽ‫ش‬६प஍૨৓ऊणऌी಍ृऊपৌૢदऌ‫ॅैँؚ‬ॊযऋସभৈः१‫ش‬অ५॑ਭऐ
ैो‫ؚ‬ফೡ‫ؚ‬ਙશ‫ؚ‬৉ୠ‫ୁ੉ؚ‬ಉपऊऊॎैङ඿ిपථैचॊ঺ভ
‫॑ۉڸھ‬ਈপ଒पણ৷ख‫ؚ‬१ॖং‫ش‬૬৑धইॕ४ढ़ঝ૬৑‫ق‬ਠৰ਼ੀ‫়੆॑ك‬औचञ਄ੌपेॉ‫ؚ‬য‫ر‬प௹ऊऔ॑ुञैघ౞ਟ঺ভभ௅धखथુથ
जभৰਠप਱ऐञ঳৴भ਄ੌَ॑6RFLHW\ُधख‫ؚ‬ਘৡप௓ਤ

ৰਠप਱ऐञ਄ੌ

岣த崡嵆嵤崰঺ভ岤峕岴岻峵଼ଥৡ਱঱峕਱岻峉岝੦ೕૼ୒ಉ峘ਘ৲த崡嵆嵤崰঺ভ崝嵤崻崡崿嵑崫崰崽崑嵤嵈峘ଡണ峕૑ਏ峒峔峵੦ೕૼ୒,R7崟崡崮嵈ଡണૼ୒岝崻崫崘崯嵤崧ૼ୒岝$,ૼ୒ ಉ଻શ峘崟崡崮嵈峑ৗ峉峔੼க൉ল峘崛崊峒峔峵ਘ峩峼થ峃峵੦ೕૼ୒୓ৗ৓峔ଡୗ౫મ峮ৗਃચ౫મ峔峓岝஘‫ر‬峔崛嵛嵅嵤崵嵛崰峘ৈ২৲峕峲峴崟崡崮嵈峘୷શ৲峕峎峔岶峵岣ಞ౫嵣崲崶崮崗崶嵕崠嵤岤੦ೕૼ୒峘ਘ৲峘૔峴্ফங২੔峼ৄྚ岲峉রশ਋ଳ৙岵峳岝૚ૼ୒峕岴岮峐ৈ岮୸ਛ৯ఏ峼ਝ৒્峕岝੦ຊଢ଼஢岵峳঺ভৰಎ峨峑峼嵒崳崊嵊崯嵓峑ਤ峫峵峘峑峙峔岹岝ৼ൩峕ඵౕ峁岬岮崡崹崌嵑嵓৓峕ଢ଼஢৫৅峃峵岽峒峕峲峴岝ৗ峉峔ఐ৾峘൉ল岝୓ৗ৓ૼ୒峘ৰਠ岝ৰ৷৲఺峝হ঵৲峼৊ৎధষ৓峕ਤ峫峵岽峒峘峑岷峵୭୆峼ତ૟

15ৗञऩ౞ਟ঺ভಉभৰਠप਱ऐथ
6RFLHW\峮6'*V峒岮峍峉౞ਟ঺ভಉ峘ৰਠ峕਱岻峐嵆崮嵒崊嵓峘ટ峉峃૽સ峙঳஺峒੎ਏ峕峔峍峐岮峵岞ŶƒƆƌƈƗƜŘőœ

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6RFLHW\धम‫့ؚ‬ᄣ঺ভ‫ؚ‬஗࿊঺ভ‫ੵؚ‬঵঺ভ‫ؚ‬ੲਾ঺ভपਢऎ‫ؚ‬ਰৣभेअऩৗञऩ৽ੋ঺ভ॑ःअ‫؛‬⋇ १ॖং‫ش‬૬৑धইॕ४ढ़ঝ૬৑॑ৈ২प੆়औचॊऒधपेॉ‫ؚ‬⋈ ৉ୠ‫ؚ‬ফೡ‫ؚ‬ਙશ‫ୁ੉ؚ‬ಉपेॊત୷ऩऎ‫ؚ‬੗஘ऩॽ‫ش‬६‫ؚ‬ཎ૔৓ऩॽ‫ش‬६पऌी಍ृऊपৌૢखञঔঀृ१‫ش‬অ५॑઀୹घॊऒ
धद৽ੋ৓৅னध঺ভ৓ୖ਻भੰৠ॑૏য়ख‫ؚ‬⋉ য‫ر‬ऋ඿ిदણৡप௥ठञସभৈःেણ॑ଛॊऒधभदऌॊ‫ؚ‬য৑রੱभ঺ভ

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೑ऋবभॼঀॸॡঀট४‫؞ش‬౫મী৙भਘा‫ ٹ‬ર島峉ੴ௙岝৽ୡ岝崶崎崷崎岝ྠ峙岝ଢ଼஢঻嵣ૼ୒঻ಉ峕শফ໮஋岿島峐岮峵‫਼ ٹ‬ੀ৘ৃ峑శଞ峕ৈ岮崟崏崊峼ඃ੭峁峐岮峵ષ৯岶੗ਯோ૔峁峐岮峵‫ ٹ‬੟ਙ峮౫મ൉ଲ崿嵕崣崡ಉ峕ঢ়峃峵ଐସ峔崯嵤崧峘ோ૔峁峐岮峵‫ ٹ‬૛ધ଺ਬ৷ਯ峘਼ੀ嵑嵛崕嵛崘峕岴岮峐੟౫ਃଡ岶਼ੀਸ਼ਜ਼峒峔峍峐岮峵਼ੀ৘ৃदৈः३ख़॔॑ඃ੭घॊષ৯੗ਯ
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ॺচॱঽ৿੤ઙૄভ঺੦ೕ౫મૼ୒৖૿ਊ৖শ‫ ٳ‬঱പ‫ ٳ‬෭੨

਎੃প৾੟ସ಍ཝଁ়३५ॸ঒ುਡઇ౸‫؞‬৲৾ଢ଼஢ਚઇ౸
ॺচॱঽ৿੤ઙૄভ঺੔ਤૼ୒৫৅ढ़থঃॽ‫؞ش‬੦ೕ౫મૼ୒৖শಂਛ໏‫ ٳ‬ਸઢ ඤఴ‫ ٳ‬ඔ৙ വઃ‫ ٳ‬๹ਉ ਮ๵‫ ٳ‬௿ૺ৛ ᆑ‫ ٳ‬ৈ๤ ൞ဧ‫ ٳ‬૱ি ಂஸ‫ ٳ‬ை௔ ฝ৕‫ ٳ‬ଞষ ઌఘ‫ ٳ‬র৛ ඈ൞‫ ٳ‬ವ୕ ෎ื‫ ٳ‬ଶম ਮึ‫ ٳ‬஝ৃ ຫਦ‫ ٳ‬௔ ඈྒྷ৕‫ ٳ‬৐ি ඥ৕‫ ٵ‬ਕਣ ଐઉ‫ ٳ‬จฒ ৗ੘‫୺ ٳ‬௖ ༌৕‫ٳ‬Ṍಇ঳‫ق‬਴ਛফা঩‫كع‬‫عق‬਴ਛফা঩‫ك‬ূ਎প৾প৾੹ੵ৾௺ଢ଼஢ఐઇ౸
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ূਨপ৾౞ਟఐ৾ૼ୒ુ৊ଢ଼஢७থॱ‫ش‬ઇ౸ਕഇॣ঑ढ़ঝઙૄভ঺෋ষ૽৩‫؞‬ইख़ট‫ ش‬૯ଘଢ଼஢ਚ ௿ૺ৛ଢ଼஢஼শ
ূਨপ৾সര౫મଢ଼஢ਚশ
ઙૄভ঺঩য়ଲ੿ਚଢ଼஢৫৅ॢঝ‫ش‬উ ૼపশഭਲ਼ৗୂౣૐଂୢ௜৖ౣૐ੻৩
ূ਎প৾প৾੹৶৾௺ଢ଼஢ఐઇ౸
বয়ଢ଼஢৫৅১যఐ৾ૼ୒ஷ௪ਃଡ ଢ଼஢৫৅ਅറ७থॱ‫ش‬੫઺ઈ੾஼শ‫؞‬ইख़ট‫ش‬
177੟ਙఐ৾ଢ଼஢ਚ঱ఆ્શଢ଼஢৩
বয়ଢ଼஢৫৅১য੟ସ‫؞‬౫મଢ଼஢ਃଡ৶হশ‫ূ؞‬਎প৾੕শ્શ૞ଖ‫؞‬ઇ౸੡ଽોপ৾প৾੹ੵ৾ଢ଼஢ఐઇ౸
বয়ଢ଼஢৫৅১য ৗग़ॿঝॠ‫؞ش‬ਓ঵ૼ୒੕়৫৅ਃଡ
ઙૄভ঺७ঝংথॡ਄ഁ૽ বয়ଢ଼஢৫৅১যਲஞଢ଼஢৫৅ਃଡ૰হ
ূ਎ੵ঵প৾੡༁ઇ౸‫؞‬৐৾শবয়ଢ଼஢৫৅১যਓ঵ૼ୒੕়ଢ଼஢ਚ‫؞‬५আথॺটॽॡ५ଢ଼஢७থॱ‫ش‬শূ਎প৾েਓૼ୒ଢ଼஢ਚઇ౸
঩মਗ਼ਞઙૄভ঺ ३५ॸ঒উছॵॺইज़‫ش‬঒ଢ଼஢ਚ ਌ఆૼ୒਌ୌ

‫؟ٵق‬਌ਪ‫؟ٴؚ‬਌ਪ৻৶‫ؚ‬รูറ‫ؚ‬૜ેఠದ‫ك‬ॼঀॸॡঀট४‫؞ش‬౫મী৙भଢ଼஢৫৅ਅറਫ਼ୈ੿঵৖ভ‫ ٳ‬੩঱ ෞ࿙‫ ٴ‬঱പ ಂਛ‫ ٳ‬৔ি ૦‫ ٳ‬ে௭ ௧ஂ‫ൃ ٳ‬৑ઌ౶৕‫੺ ٳ‬ઢ ௹୾ূ਎প৾੔ഈఐ৾ૼ୒ଢ଼஢७থॱ‫ ش‬ၳઇ౸਎੃প৾੟ସ಍ཝଁ়३५ॸ঒ುਡ ઇ౸‫؞‬৲৾ଢ଼஢ਚ ઇ౸෵ᡳଝ྆প৾৶ੵ৾৖ਗ਼৕ੵ৾ఐ ઇ౸পଚপ৾প৾੹ੵ৾ଢ଼஢ఐૢ৷৲৾௧వ ઇ౸঩মୢ௜ଢ଼஢৫৅ਃଡ ਅറ௓ਤ৖౼धੱभଢ଼஢ୖ ୖশਕഇॣ঑ढ़ঝઙૄভ঺ ଢ଼஢৫৅ਅറ৖ ৹ਪ‫؞‬ਅറॢঝ‫ش‬উ ঐॿ‫ش‬४ক‫ش‬‫ ٳ‬ଯઢ

ਕഇॣ঑ढ़ঝઙૄভ঺ ଢ଼஢৫৅ਅറ৖ೢ੘‫ ٳ‬ঢ় ઌ঳୙‫ ٳ‬ഉદ ඤ୏‫❅ ٳ‬ஏ ༌ఴ‫ ٳ‬ৈ๤ ૸வ৕‫ ٳ‬ை௔ ฝ৕‫ ٳ‬ির ร੸‫ ٳ‬ந෵ઃ ৾‫ ٳ‬৔ઢ ๬ਦ‫ ٳ‬রധ ข਴‫ ٵ‬র৛ ඈ൞‫ ٳ‬ଫਆ ෞ‫ ٳ‬௔ ඈྒྷ৕‫ ٳ‬ਉ མ৕‫ ٳ‬঳പ ୬୙‫ق‬਴ਛফা঩‫كع‬৶৲৾ଢ଼஢ਚ൉৅੟ਙଢ଼஢७থॱ‫ ش‬ঘॽॵॺজ‫شॲش‬ূ਎প৾প৾੹ੵ৾௺ଢ଼஢ఐਗ਼ਞ௺ੵ৾௧వ ઇ౸ઙૄভ঺௹িরఙଢ଼஢ਚ ਅറଢ଼஢੫઺‫؞‬௓ਤ஼ ஼শয়୵ை॔४॔୬਴ஞপ৾‫؞‬ব੠৽੾৾৖ ၳઇ౸ഭਲ਼ৗୂౣૐଂୢ௜৖ ৖শృପপ৾প৾੹ੵ৾ଢ଼஢੹ ૢ৷৲৾৖୅ ઇ౸ਨਲ੊প৾প৾੹ੵ৾ଢ଼஢੹ ઇ౸੟ସ‫؞‬౫મଢ଼஢ਃଡ‫়ଁ؞‬஑౫મ৫৅‫؞‬ੲਾ੦ೕ৖୅ॢঝ‫ش‬উজ‫شॲش‬ূ਎প৾প৾੹ ઃ਼৻ੴચఐ৾ଢ଼஢৖୅੔ഈযੵੴચ৾ઇ୘ఞဟ൥ౠ ્ભၳઇ౸
ఐ৾ૼ୒ஷ௪ਃଡଢ଼஢৫৅ਅറ७থॱ‫ ش‬੫઺ઈ੾஼ ஼শ‫؞‬ইख़ট‫ش‬ઙૄভ঺঩য়ଲ੿ਚଢ଼஢৫৅ॢঝ‫ش‬উ੦ຊଢ଼஢७থॱ਌ଵଢ଼஢৩উট४ख़ॡॺজ‫ॲش‬বয়ଢ଼஢৫৅১য ৗग़ॿঝॠ‫؞ش‬ਓ঵ૼ୒੕়৫৅ਃଡ
ূ਎ੵ঵প৾ੵ৾੹ ੲਾৢਦ௺ ၳઇ౸ূ਎ੵ঵প৾੟ସ৶ੵ৾੹ ઇ౸‫؟ٵق‬਌ਪ‫؟ٴؚ‬਌ਪ৻৶‫ؚ‬รูറ‫ؚ‬૜ેఠದ‫ك‬18‫عق‬਴ਛফা঩‫ك‬৹ਪੰෲॢঝ‫ش‬উ ঐॿ४ক‫ش‬ॼঀॸॡঀট४‫؞ش‬౫મী৙ ଢ଼஢৫৅ਅറ ਫ਼ୈभ৽༬
ॼঀॸॡঀট४‫؞ش‬౫મఐ৾ૼ୒੻৩ভ
‫ٹ‬ਸ਼৚‫ق‬਴ਛফা঩‫ك‬‫੿؞‬঵৖ভभਝ઼॑ৠ৒
‫ٹ‬ਸ਼‫ڮ‬৚‫ق‬਴ਛফা঩‫ك‬‫੿؞‬঵৖ভभਫ਼ୈ૾யभਾઔ
‫؞‬થ௙঻঄॔জথॢ
‫ٹ‬ਸ਼‫گ‬৚‫ق‬਴ਛফা঩‫ك‬‫੿؞‬঵৖ভभਫ਼ୈ૾யभਾઔ
‫ٹ‬ਸ਼‫ڰ‬৚‫ق‬਴ਛফা঩‫ك‬‫؞‬થ௙঻঄॔জথॢ
‫੿؞‬঵৖ভभਫ਼ୈ૾யभਾઔ
‫ٹ‬ਸ਼‫ڱ‬৚‫ق‬਴ਛফা঩‫ك‬‫؞‬થ௙঻঄॔জথॢ
‫؞‬ଢ଼஢৫৅ਅറपणःथଟ৮
‫ٹ‬ਸ਼‫ڲ‬৚‫ق‬਴ਛফা঩‫ك‬‫؞‬ଢ଼஢৫৅ਅറपणःथଟ৮

ॼঀॸॡঀট४‫؞ش‬౫મী৙भଢ଼஢৫৅ਅറਫ਼ୈ੿঵৖ভ

‫ٹ‬ਸ਼৚‫ق‬਴ਛফা঩‫ك‬‫੿؞‬঵৖ভभਝ઼
‫؞‬થ௙঻঄॔জথॢ
‫ٹ‬ਸ਼‫ڮ‬৚ ਴ਛফা঩‫ك‬‫؞‬થ௙঻঄॔জথॢ
‫؞‬ਫ਼ୈभ্਱ਙभৠ৒
‫ٹ‬ਸ਼‫گ‬৚ ਴ਛফা঩‫ك‬‫؞‬થ௙঻঄॔জথॢ
‫ٹ‬ਸ਼৚ ਴ਛফা঩‫ك‬‫؞‬થ௙঻঄॔জথॢ
‫؞‬ऒोऽदभਫ਼ୈभତ৶
‫ٹ‬ਸ਼‫ڱ‬৚ ਴ਛফা঩‫ك‬‫؞‬થ௙঻঄॔জথॢ
‫؞‬ଢ଼஢৫৅ਅറभ্਱ਙपणःथଟ৮
‫ٹ‬ਸ਼‫ڲ‬৚ ਴ਛফা঩‫ك‬‫؞‬થ௙঻঄॔জথॢ
‫؞‬ଢ଼஢৫৅ਅറ ಞ੧ पঢ়घॊଟ৮

਴ਛফা ॼঀॸॡঀট४‫؞ش‬౫મী৙ ଢ଼஢৫৅ਅറ

ৠ৒৯ఏध੦ম৓ऩ५ॱথ५
‫ ٹ‬6RFLHW\ृ6'*Vಉभৰਠप਱ऐथઉએघॊदँौअ੗ऎभ෢॑ઃ‫ر‬धઊ୊ख‫ؚ‬ਓ঵ஷ௪धযథभَౘचُभ૏্प๾൴‫؛‬‫ ٹ‬जभञीप‫঺ؚ‬ভऋૢରखञऎऩॊྟৡ৓ऩਃચ॑੅णঐॸজ॔ঝभ൉ল॑
௓ਤख‫঺ؚ‬ভभ૗୓॑ਘৡपᏋਬघॊَঐॸজ॔ঝपेॊ঺ভ୓୵‫ق‬ঐॸজ॔ঝ୓୵‫ُ॑ك‬ৰਠ‫؛‬َঐॸজ॔ঝ୓୵ُभৰਠप਱ऐथ‫ؼ‬ྟৡ৓ऩਃચ॑੅णঐॸজ॔ঝभ൉লपਸइ‫ؚ‬൉লऔोञঐॸজ॔ঝ਼॑पଛॉলघ१ॖग़থ५੦ೕभଡ
ണृଢ଼஢েਓਙ॑਱঱औचॊَছ঎੝୓ُಉभৰਠ॑
৯੐घ‫؛‬

ঐॸজ॔ঝऋ਌૽ध
ऩढथ঺ভ૗୓॑ऐ॒ਬ‫آ‬َྟৡ৓ऩਃચُभ൉লप਱ऐथ‫ؼ‬ৗૠ౫મभ൉লभाऩैङ‫ؚ‬ใோ౫મभશ৷ಥषभ
ன৫‫؞়ଁ؞়੆ؚ‬३५ॸ঒৲धःढञ஘‫ر‬ऩু஺॑ણ৷‫؛‬ऽञ‫ؚ‬೑ऋবभব੠৓ऩউঞ८থ५॑೐੅‫؞‬਱঱औचथःऎधधुप‫ؚ‬లਟभଢ଼஢৫৅भ૿ःুधऩॊ଄঻
ृ঺ভ৸৬॑Ꮇऌणऐॊञी‫ؚ‬ঐॸজ॔ঝभྟৡृ੎
ਏਙ॑ॎऊॉृघऎ৅ਦ‫؛‬㻹㻿㻿䛻䛚䛔䝉䞁䝃䠄㻹㻿㻿䝣䜷䞊䝷䝮䠤䠬䜘䜚ᢤ⢋䞉ຍᕤ䠅䛆ᕥ䛇䝣䝺䜻䝅䝤䝹⏕య䝉䞁䝃䠄䝘䝜䝔䜽䝜䝻䝆䞊䞉ᮦᩱศ㔝䛾◊✲㛤Ⓨᡓ␎᳨ウసᴗ㒊఍㈨ᩱ䜘䜚ᢤ⢋䞉ຍᕤ䠅䛆ྑ䛇䜰䝉䝏䝺䞁䜢྾╔䛩䜛㻹㻻㻲㻛㻯㻼㻸㻙㻝䠄ி኱䠅䠄➨㻥ᮇ䝘䝜䝔䜽䝜䝻䝆䞊䞉ᮦᩱ⛉Ꮫᢏ⾡ጤဨ఍㈨ᩱᢤ⢋䞉ຍᕤ䠅

19ঐॸজ॔ঝ୓୵भৰਠप਱ऐञୖ਻
ਏ੷岿島峵嵆崮嵒崊嵓峘ಌ峔峵ৈ২৲嵆崮嵒崊嵓ଢ଼஢峘শ਋ਙ峢峘ৌૢ崯嵤崧峘୤嵣ସ岝崯嵤崧嵁嵤崡৲峢峘ਏ੷峕ৌ峃峵ৌૢଢ଼஢৫৅੒઴峘ಇ峝ฎ峩峮૘৕৲ಉ峕峲峴ৱস峮ଢ଼஢峘૿岮ু峘 ਂଌ岝ଢ଼஢৫৅峇峘峬峘峘েਓਙ峘਱঱岶૑ਏଢ଼஢஼峒ড়৑峘崡崙嵤嵓峘୷峮崛崡崰એಉ峘হ঵৲峢峘崖嵋崫崿嵆崮嵒崊嵓峒ਈીଲષ峘෱௞岝঺ভ崳嵤崢嵣ૼ୒崟嵤崢峘੗஘৲嵣ളහ৲岝ਓ঵ੀ岶್岲峵੦ຊଢ଼஢崽崏嵤崢峢峘ୖ਻峢峘ৌૢহ঵৲峮ৗ峉峔৷ಥன৫峼ා৅峃峵崝嵅嵤崰৬਑峘ਂଌব੠଼ଥৡ峘உୌ峕ঢ়峹峵崿嵕崣崡ૼ୒ಉ岝૛ધ峼છ岷峕岹岮ૼ୒୩ୠ峕ৌ峃峵ిજ峔௬੼ກ峘ਝ৒
ঐॸজ॔ঝ୓୵॑ৰਠघॊञीभ఻৬৓ऩ਄ੌ
‫঺كڭق‬ভ૗୓॑ुञैघྟৡ৓ऩਃચ॑੅णঐॸজ॔ঝभ൉ল
‫୓كڮق‬ৗ৓ঐॸজ॔ঝ਼॑पଛॉলघ१ॖग़থ५੦ೕभଡണ
‫كگق‬ଢ଼஢৫৅भ஍૨৲‫؞‬ৈச৲‫؞‬ৈ২৲॑ৰਠघॊছ঎੝୓
‫كڰق‬ঐॸজ॔ঝ୓୵॑ৰਠघॊञीभ௓ਤ্ੁ

ঐॸজ॔ঝ୓୵भৰਠ



20‫঺كڭق‬ভ૗୓峼峬峉峳峃ྟৡ৓峔ਃચ峼੅峎嵆崮嵒崊嵓峘൉লਏ੷岿島峵嵆崮嵒崊嵓峘ಌ峔峵ৈ২৲嵆崮嵒崊嵓ଢ଼஢峘শ਋ਙ峢峘ৌૢ ঺ভ૗୓॑ुञैघྟৡ৓ऩਃચ॑੅णঐॸজ॔ঝभ൉ল⋇‫ق‬ⓠ‫ك‬ৗ峉峔જ峴ઠ峕੦峏岹嵆崮嵒崊嵓ਃચ峘ఁ୑ྟৡ৓峔ਃચ峼੅峎嵆崮嵒崊嵓൉ল峘峉峫岝૯ᅆ৓峔୩ୠ峼ਝ৒峁岝ਅറ৓峔ী৙੆়峮ৗ峉峔৷ಥ峘ා৅峼峙岵峵ৼખ੟ਙ峼৔ෆ峃峵தള়౫મ‫ ٳ‬ೄ୤৲峮ਘ২嵣ິ೸ਙ峘਱঱峔峓ളਯਃચ峼৊ৎ峕ৰਠ峃峵੎ਏਙ岶ৈ峨峍峐岮峵‫ྟ ٳ‬ৡ৓峔ਃચ峼੆়岿峅岝౐঳ಞ౫峑峙峔峁岲峔岮੼க峼ে峩ল峃਄峴ੌ峩峼௓ਤ‫ ٳ‬౫મ峘યী峕峒峳峹島峔岮੆়౫મ୩ୠ峼൉ল峃峵岽峒峑岝ৗ౫મਝੑ੐ଉ峼ଡണ峁岝০峨峑峔峁岲峔岵峍峉ৈਃચ嵆崮嵒崊嵓峼ৰਠৈਦ౅ਙ嵣ৈິ୲ਙ峘ฑໞള়౫મ岣ྐ೐ਘ৲崚嵓岤‫ق‬ਨপ‫٭‬-67‫٭‬৔దਿ崿嵔崡嵒嵒嵤崡岝+‫ك‬嵆崮嵒崊嵓峘ਃચ峼প்峕ఁ୑峃峵శ਴ཀྵ૾ଙ嵣૆਍৒ଡୗ峘ણ৷‫ ٳ‬శ਴ཀྵ嵣૆਍৒૾ଙ峼ஂ峁峐਍৒৲岿島峉ଡୗ峮ৼಉ峕ି৯峁岝岽島峳岶মସ৓峕થ峃峵੟৶৓嵣৲৾৓ਙସ峼ਬ岷ল峃岽峒峑ৗྜྷ崡嵆嵤崰嵆崮嵒崊嵓峼൉ল‫ ٳ‬జਟ峘೸ଁੑৡ৾峮ખૢச২૛峘ଞ௙峼த岲峉岝శ਴ཀྵ嵣૆਍৒૾ଙ峼੦ຊ峒峁峉౫મఐ৾峼નয়峁岝ਹ৷૭ચ峔嵆崮嵒崊嵓峘ரథ峒੟ਙ峼প்峕ఁ୑峹峄岵峔ਃ༊৓ඵౕ峕峲峍峐੥အଡୗ峘ৼૡ୎峼କ岽峁岝৅୾岶૗৲峃峵ী৕崱嵇崶੥အ岞ਨপ嵣టઢ峳岞
1DWXUH &RPPXQ ৗਃચ嵣ఄඩ৓峔ਃચ਱঱峘૭ચਙ峼෸峫峵ে੟嵉崓崳崢嵈峘ણ৷‫ ٳ‬౞峊ેী峕ણ৷峑岷峐岮峔岮ে੟峘੅峎ྟৡ৓峔ਃચ峼岝ളහ峔ী৕崟崡崮嵈ಉ峘ৎ૬৑਑౪岿島峉嵉崓崳崢嵈峼਄峴੢峪岽峒峑嵆崮嵒崊嵓峕峲峴ৰਠ‫ ٳ‬தৈ૎২嵣৵஑峕岴岮崣嵛崟嵛崘峮岝ৈ২峔୭୆ిૢਙ峼થ峃峵ঽഞఊ୮嵆崮嵒崊嵓ಉ峘崸崌崒崌嵛崡崹崌崊‫ص‬崱峘嵆崮嵒崊嵓嵣崿嵕崣崡৫৅峼௓ਤᆦད಍ཝ॑ਹ৷खञपउः७থ१
‫ূق‬প‫٭‬-67উঞ५জজ‫ش‬५‫ؚ‬+‫ك‬

21 ঺ভ૗୓॑ुञैघྟৡ৓ऩਃચ॑੅णঐॸজ॔ঝभ൉ল⋈‫ق‬ⓡ‫ك‬ਅറ৓嵣੅ਢ৓峕ਤ峫峵峣岷ଢ଼஢୩ୠ೑岶ব岶ਘ峩峼ଢ଼஢৫৅୩ୠ峮6RFLHW\峮6'*Vಉ峘ৰਠ峕਱岻峐૑ਏ峒峔峵崲崶崮崗嵣౫મఐ৾ૼ୒峼ಲਢ৓峕୘ਛ峃峵ৗ੪ಞਅറ崐崵嵓崖嵤૗ఌ嵣ฅ୉峼୓ৗ峃峵嵆崮嵒崊嵓‫ ٳ‬岽島峨峑峘਄ੌ峙਼ੀ৓峔ଢ଼஢৫৅峘૴島峼੔଑‫ٳ‬6RFLHW\峘ৰਠ峕峙ৎ৑嵣ৃਚਖ峹峄ઞ৷૭ચ峔
崐崵嵓崖嵤ૼ୒岶૑ਏ‫ ٳ‬০৏峙岝੪ಞ嵣੟ସ峘࿯୭峮崝崡崮崌崲崻嵒崮崋嵤峼৯੐峁岝੪ಞ峘੅峎౞৫ิ峘ৗਃચ峘୯੷峒൉ল峕਄ੌ峪‫ٳ‬ਗ਼౱ಉરਜ਼ਙ峘ৈ岮ૼ୒峼ਅറ৓ಲਢ৓峕௓ਤ‫ٳ‬崗嵒嵤嵛峔൉嵣໮崐崵峘ৰਠ峼৯੐峃崽崋嵓嵈஑嵂嵕崾崡崓崌崰୬഻ਗ਼౱‫ق‬੟ସ嵣౫મଢ଼஢ਃଡ+3峲峴‫ك‬‫ق‬૯ଘ༙ၤপ৾૝௳ଢ଼஢஼+3峲峴‫ك‬,R7$,ৎ৻峘୓ৗ崯崸崌崡‫ ٳ‬崝崌崸嵤૬৑峒崽崋崠崓嵓૬৑峼ᇽ岺峉峫岝崰嵒嵒崒嵛崣嵛崝ৎ৻峼ৄྚ岲峉崣嵛崝ૼ୒岝஘‫ر‬峔૾ய峮୭୆峕ిૢ峑岷峵崊崗崩嵍崐嵤崧ૼ୒峘৫৅岶੎ਏ‫ ٳ‬ੲਾ૪৶峘ಌ峔峵ৈ২৲峼੍岲峵嵆崮嵒崊嵓峘୓ৗ఺峝峇島峳峼੍岲峵๶಍ਸੵ嵣ਕઃ੪஋ಽૼ୒峘ଢ଼஢৫৅峼௓ਤ

6Q2崲崶嵗崌嵌‫؟‬S-峑12[ਫ਼ੴ૭ચ‫ق‬$&66HQVRUV‫ك‬‫୓كڮق‬ৗ৓嵆崮嵒崊嵓峼਼峕ଛ峴ল峃崝崌崐嵛崡੦ೕ峘ଡണহ঵৲峢峘崖嵋崫崿ਓ঵ੀ岶್岲峵੦ຊଢ଼஢崽崏嵤崢峢峘ୖ਻峢峘ৌૢ

૛ધ峼છ岷峕岹岮ૼ୒୩ୠ峕ৌ峃峵ిજ峔௬੼ກ峘ਝ৒

22 ୓ৗ৓ঐॸজ॔ঝ਼॑पଛॉলघ१ॖग़থ५੦ೕभଡണ⋈ྟৡ৓ऩਃચ॑થघॊঐॸজ॔ঝऋ૑ङखु঺ভৰಎऔोॊधम଒ैऩः‫؛‬‫঺ٳ‬ভৰಎऔोॊঐॸজ॔ঝऋ௥ञघसऌ૖੯
‫؞‬५ॣ‫ش‬ছঈঝ‫؞‬ල೶ऩ൉ଲউট७५
‫؞‬প஑৲ृ३५ॸ঒৲धःढञৰ੠पઞॎोॊ஄दुਃચ॑৅มघॊ

‫ٳ‬ঐॸজ॔ঝभ৫৅॑਄ॉඕऎ੺ফभ૾ய
ඞअৌ଴ऋളහ৲

ग़থ४ॽ॔জথॢऋ
੎ਏऩ୩ୠ
HWF‫ؼ‬

ॡজ॔घसऌ૖੯ऋളහ৲

৽ੋ৓਑৺

੅ਢ૭ચਙ

¼
ऩन‫ؼ‬
‫ق‬1('2 76& )RUHVLJKW 9RO峲峴௷ხ‫ك‬঺ভदઞॎोॊञीभୖ਻॑ੰৠघॊञीपम‫ؚ‬ग़থ४ॽ॔জথॢ॑औैप஥ऎ୯੷ख‫ؚ৾‬৶‫؞‬१ॖग़থ५੦ೕ॑ଡണख‫ؚ‬जभੴৄपয়࿄खञৗञऩ౫મਝੑ‫؞‬৫৅੐ଉभ൉লऋ૑ਏ

 ୓ৗ৓ঐॸজ॔ঝ਼॑पଛॉলघ१ॖग़থ५੦ೕभଡണ⋈౫મ峘঺ভৰಎ峕਱岻峉崿嵕崣崡崝崌崐嵛崡ଡണহ঵‫ق‬0DWHUHDOL]H崿嵕崠崏崗崰‫ك‬ూବফ২੒઴પ‫ق‬੧‫؟ ك‬௲ਐ৞‫ق‬ৗૠ‫ك‬ർঐॸজ॔ঝ‫ق‬੟ସ‫؞‬౫મ‫ॹ؞‬ংॖ५‫ك‬पঢ়घॊఐ৾ૼ୒म‫ؚ‬೑ऋবप૑ਏਂ૭ಳऩ੦ೕૼ୒‫؛‬ർَ ౞ ਟ ਺ ৱ ਅ റ  ُ ‫ ك  ق‬प ਜ਼ ઼ હ ऐ ै ो ञ َ ॼ ঀ ॸ ॡ ঀ ট ४ ‫ ؞ ش‬౫ મ ఐ ৾ ૼ ୒ ଢ଼ ஢ ৫ ৅ ਅ റ ُ‫كق‬पउःथम‫୓ؚ‬ৗ৓ऩঐॸজ॔ঝ॑঺ভৰಎपणऩऑॊञी‫ؚ‬উট७५॑औैप஥ऎ୯੷ख‫ؚ৾‬৶‫؞‬१ॖग़থ५੦ೕभଡണधजोपয়࿄खञৗञऩਝੑ‫؞‬৫৅੐ଉ॑েाলखथःऎ૑ਏਙऋൕऑैोथःॊधऒौ‫؛‬ർऽञ‫ؚ‬ঐॸজ॔ঝঽ৬भৈ২৲ृ৽ੋ৓ऩ਑৺‫੅ؚ‬ਢ૭ચਙषभৌૢभञीউট७५ऋ୸ਛघसऌঁ‫ॻش‬ঝऋৈऎऩढथउॉ‫ؚ‬উট७५पणःथ੝ीथ१ॖग़থ५पয়ठନॊऒधऋ੷ीैोथःॊ‫؛‬ْ৯৓‫؞‬৯ఏٓপ৾‫؞‬বয়ଢ଼஢৫৅১যಉपउःथ‫ؚ‬ਓ৾઻ऋ৴௚खञ৬਑॑ଡണख‫ؚ‬ঐॸজ॔ঝ॑੿ॉ঱ऑथःऎज
ोझोभੵஙदেगॊ౾ਠ଴॑ఐ৾৓पੰ৥ख‫ؚ‬जभ਑౪ૼ୒ऊैউট७५ਝੑऽद॑঳ਞৢฮद਄ॉ
ੌिऒधद‫ؚ‬ঐॸজ॔ঝ॑঺ভৰಎपणऩऑॊউট७५१ॖग़থ५भଡണ‫ق‬0DWHUHDOL]H‫॑ك‬৯੐घ‫؛‬ْহ঵໪ਏٓ
ਓ঵ੀৣ੶॑௥ञघ0DWHUHDOL]Hपঢ়घॊଡ୳॑ਁ൳‫ؚ‬ଟਪ‫఼ؚ‬උ⋇৥નऩঅ४ঙথध‫఻ؚ‬৬৓ऩॱ‫ش‬।ॵॺ॑ਝ৒‫ؚ‬ਛટऋઁ෇ऩঐॸ
জ॔ঝऋથघॊुभतऎॉभୖ਻ੰৠपৱघॊुभदँॊऒध
⋈⋈ૼ୒୩ୠओधप‫ؚ‬30॑রੱप৾৔ਗपঽয়ীങ৓पோ૔घॊ
0DWHUHDOL]H 3ੴ౩‫؞‬ੲਾ‫؞୒ૼ؞‬য౫॑੥लणऐॊ৬਑॑ଡണ
30॑রੱप‫ؚ‬ঐॸজ॔ঝ൉ਛपउऐॊ
঳৴भউট७५पঢ়ॎॊ௧୅ੇ॑੥ૐ
⋉ଡണऔोञ৬਑ऋ‫ؚ‬ਓ৾઻भୖ਻ੰৠभञीभৼ୥੔धखथु
উট७५ਝੑ
ਃચख‫ؚ‬೑ऋব৸৬भঐॸজ॔ঝभ঺ভৰಎ॑ਸசघॊऒधप๾൴
ْ५य़‫ش‬঒ٓਠ଴ੰ৥ীෲ‫؞‬ੑ઴
হ঵ૠெ‫ع؟‬੏৞‫ط‬୩ୠহ঵਋৑‫ڳ؟‬ফ৑ ‫پ‬ফ৯‫ؚ‬ফ৯द५ॸ‫ش‬४।‫ॺش‬௬੼॑ৰ઱‫؛‬উট४ख़ॡॺभਤ⎃पँॎचथ஺మ৓प੫঵੍ର॑੷ीॊ‫؛‬23‫كگق‬ଢ଼஢৫৅峘஍૨৲嵣ৈச৲嵣ৈ২৲峼ৰਠ峃峵嵑嵄੝୓崯嵤崧峘୤嵣ସ岝崯嵤崧嵁嵤崡৲峢峘ਏ੷峕ৌ峃峵ৌૢ嵆崮嵒崊嵓ଢ଼஢峘শ਋ਙ峢峘ৌૢৱস峮ଢ଼஢峘૿岮ু峘 ਂଌ岝ଢ଼஢৫৅峇峘峬峘峘েਓਙ峘਱঱岶૑ਏ ଢ଼஢৫৅भ஍૨৲‫؞‬ৈச৲‫؞‬ৈ২৲॑ৰਠघॊছ঎੝୓⋇డखःଃ৆ृ૘৕৲ऋೃ୛औोॊর‫ؚ‬ব੠଼ଥৡ॑೐੅‫؞‬਱঱औचॊञी
ଢ଼஢঻भ൉ୗৡ॑ਈপ଒৅มऔचॊ୭୆ତ૟प਄ॉੌि

५ঐ‫ॺش‬ছ঎ছॺজ‫ق‬$,5RERWGULYHQ 0DWHULDOV 5HVHDUFK‫ك‬ট঎ॵॺૼ୒‫ؚ‬,R7‫ؚ‬$,ಉ॑ਈপ଒ણ৷ख‫ؚ‬ଢ଼஢஼भেਓਙ॑਱঱औचॊ‫آ‬য৑पदऌऩः়ਛृർด૬৑भఄඩ৓ఁপ
૘৕৲ಉपेॊଢ଼஢भ૿ःুਂଌੰ଎
$,%LJ 'DWDْল๕ٓਸ਼਋ॼঀॸॡঀট४‫؞ش‬౫મఐ৾ૼ୒੻৩ভ
‫ق‬ਸ਼৚‫ك‬ৱમेॉ௷ხ‫؞‬ਸੵছॖই१ॖग़থ५ী৙दम
੔ഈ৓ऩ਄ੌऋ઩৿

ॹ‫ॱش‬ฌ৿஑ଢ଼஢प૑ਏऩৈષସ‫؞‬প୤भॹ‫୹઀ॱش‬$,ট঎ॵॺधॼঀॸॡ‫؞‬౫મभ੆়୩ୠ॑ิऎ
য౫୘ਛ

౫મ൉ଲ

ৰୡ१ॖॡঝभঽ৿৲

௬੼‫؞‬
ෘହਫ਼઒

‫ق‬ం‫ك‬ঋথॳড‫ش‬ॡঽ৿৲ট঎ॵॺ
/DE'RURLG 0$+2/2ਓ঵ૼ୒੕়ଢ଼஢ਚ ಒ৯ජট঎ॸॕॡ५ীෲ‫؞‬ॹ‫ॱش‬ઽૐ

ॼঀॸॡ‫؞‬౫મী৙दु
઩ऽॉणणँॊ

ੑ೾ਃஓ‫ق‬క‫ك‬૚ரਛჍ‫؞‬௬੼ಎ઼॑ള়৲खञॡছ५ॱ‫ش‬३५ॸ঒ূ਎ੵ঵প৾ ঳പଢ଼஢஼

০৏भॼঀॸॡ‫؞‬౫મী৙प૑ਏऩট঎ॵॺ‫ؚھڶؚ‬ੑ೾ਃஓಉऋඞइॊয౫भ୘ਛु੎ਏ24

 ଢ଼஢৫৅भ஍૨৲‫؞‬ৈச৲‫؞‬ৈ২৲॑ৰਠघॊছ঎੝୓⋈ુ৷ਝ૟峮ਃஓ峘ౄৰ৲嵣ುਡ崵崫崰嵗嵤崗৲䝬䝔䝸䜰䝹㛤Ⓨ䛾ᇶ♏ຊᘬୖ䛢䛸䜲䝜䝧䞊䝅䝵䞁๰ฟ䛻ྥ䛡䛯ᙉᅛ䛺◊✲ᇶ┙䜢ᙧᡂ䛩䜛䛯䜑䚸᭱ඛ➃タഛ䜔ᶵჾ䛾᭷ຠά⏝䚸௒ᚋ䜢ぢᤣ䛘䛯᭦᪂䜔᪂つᑟධ䚸┦஫䛾䝛䝑䝖䝽䞊䜽໬䜢ᘬ䛝⥆䛝ಁ㐍䚹䝘䝜䝔䜽䝜䝻䝆䞊䝥䝷䝑䝖䝣䜷䞊䝮➼䛻䜘䜛◊✲㛤Ⓨᶵჾ䛾ඹ⏝᥎㐍䜔ᢏ⾡ᑓ㛛ேᮦ䛾⫱ᡂ➼䜢᥎㐍㐠⏝䛻ᙜ䛯䛳䛶䛿䚸⏘Ꮫᐁ䛾ᖜᗈ䛔䝙䞊䝈䛻ᛂ䛨䛶䚸ඹ⏝ᣐⅬ䝛䝑䝖䝽䞊䜽䛾ᙉ໬➼䜢⾜䛖䛸䛸䜒䛻䚸ከᵝ䛺ᨭ᥼ᙧែ䛻ᑐᛂྍ⬟䛺◊✲⪅ཬ䜃ᢏ⾡⪅䛾⫱ᡂ䛻䜒㈉⊩䚹ᡃ䛜ᅜ䛾䝘䝜䝔䜽䝜䝻䝆䞊䞉ᮦᩱ⛉Ꮫᢏ⾡䛾◊✲㛤Ⓨᢞ㈨ຠ⋡䛸ᡂᯝ䛾᭱኱໬䛻㈉⊩䚹 ଢ଼஢৫৅भ஍૨৲‫؞‬ৈச৲‫؞‬ৈ২৲॑ৰਠघॊছ঎੝୓⋉崲崶崮崗崶嵕崠嵤崿嵑崫崰崽崑嵤嵈ফ২੒઴પ‫ق‬੧‫؟ ك‬௲ਐ৞‫ق‬ফ২੒઴પ
‫؟‬௲ਐ৞‫ك‬ᴫせyॼঀॸॡঀট४‫ش‬पঢ়घॊਈ੔ഈभଢ଼஢ਝ૟धजभણ৷भঀक़ঁक़॑થघॊপ৾‫؞‬ଢ଼஢ਃঢ়ऋ৴௚ख‫ؚ‬৸ব৓ऩુ৷৬਑
॑ଡണy৖ಞ౫৫৅प૑ਏऩૼ୒‫⋇ق‬๶಍ଡୗੰෲ⋈๶಍ਸੵ⋉ী৕‫؞‬੟ସ়ਛ‫ك‬पৌૢखञਘಕऩউছॵॺইज़‫ش‬঒॑஄ਛख‫ؚ‬ਓ৾઻भਹ৷঻पৌखथ‫ؚ‬ਈ੔ഈभੑ೾‫ؚ‬௬੼‫ؚ‬ਸੵਝ૟भਹ৷ਃভ॑‫ؚ‬ৈ২ऩૼ୒੍ରधधुप઀୹
⋇‫؟‬঳৬৓ऩઈ੾্ଉ‫ق‬ਗ৖ુ৷पબॊ৯ఏਝ৒‫ؚ‬ডথ५ॺॵউ१‫ش‬অ५‫ؚ‬ਹ৷ুਢभુৢ৲ಉ‫ك‬भৣद3)॑ઈ੾
⋈‫؟‬ਹ৷঻भॽ‫ش‬६॑ૐ৺‫؞‬ীෲघॊधधुप‫ؚ‬ଢ଼஢ਠৃभૼ୒৓ୖ਻पৌख‫ؚ‬੕়৓ऩੰৠ১॑઀୹
⋉‫؟‬઱ਝ‫؞‬ਝ૟भુ৷॑ৢगञઐ૴ृੴभૐ৺पेढथ‫ؚ‬ਓ৾઻৴௚‫ؚ‬౮ী৙੆়‫ؚ‬য౫୘ਛ॑௓ਤ
ࣇኬನᡯᚐௌ
ᵚᵏᵏೞ᧙ᵜࣇኬь߻ᵚᵏᵔೞ᧙ᵜ

㉸㧗ᅽ㏱㐣ᆺ㟁Ꮚ㢧ᚤ㙾䚸㧗ᛶ⬟㟁Ꮚ㢧ᚤ㙾䠄㻿㼀㻱㻹䠅䚸ᨺᑕග ➼㟁Ꮚ⥺ᥥ⏬⿦⨨䚸䜶䝑䝏䞁䜾⿦⨨䚸䜲䜸䞁䝡䞊䝮ຍᕤ⿦⨨䚸䝇䝟䝑䝍⿦⨨ ➼Ў‫܇‬Ὁཋឋӳ঺ᵚᵏᵎೞ᧙ᵜ
ศᏊྜᡂ⿦⨨䚸ศᏊタィ⏝䝅䝭䝳䝺䞊䝅䝵䞁䚸䝅䝇䝔䝮㉁㔞ศᯒ⿦⨨ ➼25‫كڰق‬嵆崮嵒崊嵓୓୵峼ৰਠ峃峵峉峫峘௓ਤ্ੁৱস峮ଢ଼஢峘૿岮ু峘 ਂଌ岝ଢ଼஢৫৅峇峘峬峘峘েਓਙ峘਱঱岶૑ਏহ঵৲峢峘崖嵋崫崿૛ધ峼છ岷峕岹岮ૼ୒୩ୠ峕ৌ峃峵ిજ峔௬੼ກ峘ਝ৒ίᾃὸἰἘἼỴἽ᪃ԡỉẺỜỉਖ਼ᡶ૾ሊ⏘ᴗ৐஽भ਄ॉੌाಉ॑௓ਤघॊ঱द‫ؚ‬૑ਏऩଳਡ

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28

【Special Lecture / 特別講演】【Special Lecture / 特別講演】

“MEMS Toward Realizing Super Smart Society”「超スマート社会に向けた MEMS の実用化」

Masayoshi Esashi (Tohoku University, Japan)
江刺 正喜（東北大学）

31

超スマート社会に向けた MEMS の実用化
江刺 正喜、戸津 健太郎
東北大学

マイクロシステム融合研究開発センター〒 980-0845 仙台市青葉区荒巻字青葉 519-1176

概要
容量検出回路を集積化しウェハレベルパッケージングした、集積化容量型圧力センサから始まり、MEMS と LSI のヘテロ集積化により高度化した各種のシステムを実現してきた。人と共存しても安全なロボットにするため、その表面に多数の触覚センサを配置してパケット通信網によりリアルタイムで接触を分かるようにする触覚センサネットワーク、非常用の通信などを可能にする LSI 上のマルチ SAW フィルタ、高速のマスクレス描画で LSI を製作するため、アクティブマ
トリックス動作する 1 万本のマルチ電子源について述べる。また共用設備を用い自分で試作開発する「試作コインランド」を紹介する。

I. はじめに
半導体微細加工による MEMS を用いると、チップ上に回路だ
けでなくセンサや通信要素などの多様な部品を形成し、高付加価値の小形システムを実現することができる。高度な LSI を組み合わせ、多くのシステムがつながる超スマート社会に貢献する。

II. MEMS と LSI のヘテロ集積化
図 1 は、研究室で製作した CMOS 集積回路で微小容量を検出できるようにした集積化容量型圧力センサである
［1］
。ウェハ状
態で封止した構造にするウェハレベルパッケージングを用いている。その後、LSI ファウンダリで高度な CMOSLSI を製作してもらい、この LSI 上に別のウェハ上に製作した MEMS を転写する
ヘテロ集積化により、以下のようなシステムを製作してきた。
図 2 は介護ロボットのような人と共存する安全なロボットのために製作した、触覚センサネットワークである。接触力で静電容量が変化する MEMS を付けた LSI に、貫通配線を形成しフレキ
シブル基板に接続した。ロボットの体表に多数の触覚センサを分布させ、それらを 45 MHz のパケット通信網で接続することにより、
リアルタイムで接触を検知し危険を回避する［2］。
図 3 は通信用フロントエンド LSI の上に、多数の異なる共振周波数の表面弾性波（SAW）フィルタチップを裏返しで配置した
マルチ SAW フィルタである。SAW フィルタのウェハをガラス
ウェハにポリマで貼り付けてダイシングし、LSI 上にバンプ接合
した後、裏面より YAG レーザを照射してポリマを炭化することにより LSI 上に選択転写して製作してある。これは災害時にでもワイヤレス通信を確保できるように、ディジタルテレビの空いたチャネル（ホワイトバンド）を用いた通信機能を、スマートフォンなどに持たせるために開発した［3］。
図 4 に示すスループットの大きな超並列電子線描画装置を開図 1．集積化容量型圧力センサ

図 2．触覚センサネットワーク

32

発してきた［4］。LSI のディジタルファブリケーションにあたるマ
スクレス露光が目的で、図 4 上は、このためのアクティブマトリッ
クスナノクリスタル (nc)Si マルチ電子源の断面構造と LSI の写真である。10 V 程度の低電圧で電子放出を可能にするため、HF
中で Si を陽極酸化して形成したトンネル接合のカスケード構造
を電子源に用いている。10 mm 角の Si に形成した 100 × 100 のnc-Si 電子源アレイから、貫通配線でアクティブマトリックス駆動用の LSI に接続してある。LSI にも貫通配線が形成され同心円状に電圧を印加して電子光学系の収差補正 ができるようになっている。下はこれを用いた 1/100 縮小描画装置のプロトタイプである。

図 3．LSI 上のマルチ SAW フィルタ

III. 試作コインランドリ
MEMS は多品種・少量で使われることが多く、標準化しにくいため開発がボトルネックとなる。試作設備が必要であるが、これを共用し完成度の高い研究開発を行わないと役に立たない。
大学に人材を派遣して、時間貸しの試作設備を利用しながら、自分で開発および製品製作を行う「試作コインランドリ」が活用
されている
［5］
。4/6 インチウェハ用の古い設備を用いて時間貸しで使うもので、今まで 240 社以上が利用しており、2 億円の運転
経費の 7 割を利用料でカバーしている。この他に展示室で、各種 MEMS などを見ることができる
［6］
。

参考文献
［1］松本佳宣，江刺正喜，電子情報通信学会論文誌，J75-C-II (1992)
pp.451-461［2］M.Makihata et.al.,Sensors and Actuators A, 188 (2012) pp.103-110［3］K.Hikichi et.al., 2014 IEEE International Frequency Control Symposium,
Taipei, Taiwan (May 19-22, 2014) p.246［4］江刺正喜 他，超並列電子ビーム描画装置の開発−集積回路のディジ
タルファブリケーションを目指して−」東北大学出版会 (2018)［5］戸津健太郎，産学官連携ジャーナル，9, 5 (2013) pp.4-8［6］展示室 http://www.mu-sic.tohoku.ac.jp/nishizawa/

江刺

図 4．アクティブマトリックス 100
× 100 マルチ電子源（上）と、それを用いた 1/100 縮小超並列電子線描画装置のプロトタイプ（下）正 喜（えさし まさよし）1971年東北大学工学部電子工学科卒。1976年同大学院博士課程修了。
同年より東北大学工学部助手、1981年助教授、1990年より教授となり現在（マイクロシステム融合研究開発センター（ȝSIC））、（兼）革新的イノベーション研究機構（COI）（リサーチフェロー））に至る。MEMS、半導体センサ、
マイクロシステム、集積回路の研究に従事。
著書：「半導体集積回路設計の基礎」培風館（1986年）、「はじめての MEMS」
森北出版（2011年）、「これからの MEMS」森北出版（2016年）、「超並列電子ビーム描画装置の開発」東北大学出版会（2018年）他
受賞：紫綬褒章（2006年）、IEEE Andrew S.Grove Award (2015)、IEEE Andrew
Jun-ichi Nishizawa medal (2016) 他

33

34

㻯㼍㼠㼔㼑㼠㼑㼞㻌㼜㻴㻘㻌㻼㻯㻻㻞 㼙㼛㼚㼕㼠㼛㼞㻌㻔㻷㼡㼞㼍㼞㼑㻘㻌㻺㼕㼔㼛㼚㻌㻷㼛㼔㼐㼑㼚㻕㻌㻔㻝㻥㻤㻟㻕(K. Shimada (Kurare), M. Esashi
and T. Matsuo et.al.: Application ofcatheter-tip I.S.F.E.T. for continuousin vivo measurement, Med. & Biol.
Eng. & Comput., Vol.18, No.11,
pp.741-745 (1980))(2019/2/1)

㻟㻚㻌㻴㼍㼚㼐㼟㻙㼛㼚㻌㼍㼏㼏㼑㼟㼟㻌㼒㼍㼎㼞㼕㼏㼍㼠㼕㼛㼚㻌㼒㼍㼏㼕㼘㼕㼠㼥㻠㻚㻌㻹㻱㻹㻿㻌㼟㼔㼛㼣㼞㼛㼛㼙 & open collaboration㻞㻚㻌㻴㼑㼠㼑㼞㼛㼓㼑㼚㼑㼛㼡㼟㻌㼕㼚㼠㼑㼓㼞㼍㼠㼕㼛㼚㻌㻔㻹㻱㻹㻿㻌㻗㻌㻸㻿㻵㻕㻝㻚㻌㻵㼚㼠㼞㼛㼐㼡㼏㼠㼕㼛㼚㻌DŝĐƌŽ^ǇƐƚĞŵ/ŶƚĞŐƌĂƚŝŽŶĞŶƚĞƌ;ʅ^/Ϳ͕dŽŚŽŬƵhŶŝǀ͘

Masayoshi Esashi (Ụ่ṇ႐)(㉸䝇䝬䞊䝖♫఍䛻ྥ䛡䛯MEMS䛾ᐇ⏝໬)MEMS Toward Realizing Super Smart Society

3

1

Selective etching of Si3N4 and Si
Oxidation, diffusion furnaceHome-ŵĂĚĞƐĞŵŝĐŽŶĚƵĐƚŽƌĨĂĐŝůŝƚǇŝŶϭϵϳϱ

Double-side aligner

Mask aligner

42

10th ,ĞƌŝƚĂŐĞ͕/:;ϮϬϭϳͿ

(M.Esashi & T.Matsuo, Supplement to the J.J.A.P.,44 (1975) 339)

(wafer process for reliable assembly)/^&d;/ŽŶ^ĞŶƐŝƚŝǀĞ&ŝĞůĚĨĨĞĐƚdƌĂŶƐŝƐƚŽƌͿ

䠄T.Matsuo, M.Esashi, K.Iinuma, Tohoku
region meeting of Electrical Eng.(1971)䠅

50ȝP

35

5

(M.Esashi et.al., Technical report on semiconductor and transistor, IEC,SSD85-51, (1985))ϳWĂƌĂůůĞůŝŵĂŐĞƉƌŽĐĞƐƐŽƌƵƐŝŶŐĐƵƐƚŽŵŵĂĚĞ/ĨŽƌϮďĂƌƌĞůƐŚŝĨƚĞƌ

(D͘ƐĂƐŚŝ Ğƚ͘Ăů͕͘dĞĐŚŶŝĐĂůƌĞƉŽƌƚŽŶƐĞŵŝĐŽŶĚƵĐƚŽƌĂŶĚƚƌĂŶƐŝƐƚŽƌ͕/͕^^ϴϱ-ϱϭ͕;ϭϵϴϱͿͿ

ǆĂŵƉůĞŽĨƉĂƌĂůůĞůŝŵĂŐĞƉƌŽĐĞƐƐŝŶŐ

(M.Esashi & M.Ohtomo, Fabrication of functional tester for LSI, Tohoku convention of IEEJ (1984))

Functional tester
was made in house(I learned digital
circuit)(M.Esashi, Experiences of LSI design, prototyping and education, Convention of IEEJ (1984))

Graphic editor programed using
Fortran (I learned programming)

Many process equipment have been made in house.
Simple and basic equipment are suitable for training people who haveexperiences of all the process steps and for developing new devices taking
advantages of process flexibility.
The facility has been shared by many laboratories.
130 companies dispatched researchers (full time, 2years).

MEMS process facility for 20 mm wafer

8Unique facility like toy
for MEMS prototyping(,͘^ĞŽ͕D͘ƐĂƐŚŝ and d͘DĂƚƐƵŽ͕&ƌŽŶƚŝĞƌƐŽĨ 6 6DĞĚŝĐĂůĂŶĚŝŽůŽŐŝĐĂůŶŐŝŶĞĞƌŝŶŐ͕ϭ;ϭϵϴϵͿ319)

Implantable telemetry CMOSICdĞǆƚďŽŽŬ͕D͘ƐĂƐŚŝ ͞&ƵŶĚĂŵĞŶƚĂůƐŽĨŝŶƚĞŐƌĂƚĞĚĐŝƌĐƵŝƚĚĞƐŝŐŶ͟;ϭϵϴϲͿ;ŝŶ:ĂƉĂŶĞƐĞͿ

36(M.Esashi, J of Micromechanics and Microengineering,18 (2008) 073001)

э ϳϬйĐŽƐƚƌĞĚƵĐƚŝŽŶ

ĐĞƌĂŵŝĐƉĂĐŬĂŐĞƐĞƚĐ͘ͿĂƐƐĞŵďůǇ͕ŶŽƵƐĞŽĨĞǆƉĞŶƐŝǀĞ11їlow cost ;ŵŝŶŝŵĂůŝŶǀĞƐƚŵĞŶƚĨŽƌїhigh reliability (hermetic sealing)

structures during dicing)їhigh yield ;ƉƌŽƚĞĐƚŝŽŶŽĨDD^ƐƵŝƚĂďůĞĨŽƌƐƵƌĨĂĐĞŵŽƵŶƚŝŶŐͿїsmall size ;ĐŚŝƉƐŝǌĞĞŶĐĂƉƐƵůĂƚŝŽŶ͕tĂĨĞƌůĞǀĞůƉĂĐŬĂŐŝŶŐ

ĚŽŶĞ͘

molding with plastics can not beDD^ŚĂǀĞŵŽǀŝŶŐƉĂƌƚƐ їŝƌĞĐƚ(Y.Matsumoto, S.Shoji, M.Esashi, 22nd Conf. on Solid State Devices and Materials (1990) 701)

Integrated capacitive pressure sensor 㻔㼀㼛㼥㼛㼐㼍㻌㻹㼍㼏㼔㼕㼚㼑㻌㼃㼛㼞㼗㼟㻕

Wafer levelpackaging

9

10

12

(S.Kobayashi & M.Esashi, Technical Digest of the 9th Sensor Symposium,(1990),137)(1,000 Tr./chip in our lab., 1,000,000 Tr./chip in company in 1990, 10,000,000,000
Tr./chip in 2018)
Common 2 wires tactile sensor array (polling type)(Y.Matsumoto, S.Shoji, M.Esashi, 22nd Conf. on Solid State Devices and Materials (1990) 701)

Integrated capacitive pressure sensor

37(M.Muroyama, M.Makihata et al., Smart Systems Integration (SSI) 2014, Vienna, Austria (2014, March 26))

15

(Collaborators, Toyota, Toyota
Central Res. Lab.)

Tactile sensor networkZĞĂůƚŝŵĞƐǇƐƚĞŵƵƐŝŶŐƉĂĐŬĞƚĐŽŵŵƵŶŝĐĂƚŝŽŶ

13

Distributed tactile sensor for safe nursing care robot

Tactile sensor network for robot (event driven type)(D͘ƐĂƐŚŝ and ^͘dĂŶĂŬĂ ͗^ƚĂĐŬĞĚ/ŶƚĞŐƌĂƚŝŽŶŽĨDD^ŽŶ>^/͕MicromachinesϮϬϭϲ͕ϳ;ϴͿ͕ϭϯϳ͖ĚŽŝ͗ϭϬ͘ϯϯϵϬͬŵŝϳϬϴϬϭϯϳ]16ŽŶĐĞƉƚŽĨƚŚĞŚĞƚĞƌŽŐĞŶĞŽƵƐŝŶƚĞŐƌĂƚŝŽŶďǇƚŚĞǁĂĨĞƌ-ůĞǀĞůƚƌĂŶƐĨĞƌ

ϭϰ>^/ǁĂĨĞƌƐŚĂƌĞĚďǇϭϲ
companies and 10 laboratories(M.Muroyama, M.Makihata, M.Esashi et al., Smart Systems Integration (SSI) 2014, (2014))

Ϯ͘ϰŵŵ

38

GND

IN2

DOUT1~4

IN1 CLK G S GFBAR on LSI for voltage
controlled oscillator

Multiband wireless communication system to beavailable in disaster (Tsunami) using white spaces of digital TV

Piezoelectric (PZT) MEMS
switch on LSI

Vdd

Tunable SAW filter
using BST varactor
5 я 11 я 22MHz

ϭϳ

19

Multi SAW filters
on LSI;^͘dĂŶĂŬĂ͕D͘zŽƐŚŝĚĂ͕,͘,ŝƌĂŶŽĂŶĚD͘ƐĂƐŚŝ͕ϮϬϭϮ//ŶƚĞƌŶĂƚŝŽŶĂůhůƚƌĂƐŽŶŝĐƐ
Symposium (2012) Ɖ͘ϭϬϰϳͿ͘㻹㼡㼘㼠㼕㻌㻿㻭㼃㻌㻔㻿㼡㼞㼒㼍㼏㼑㻌㻭㼏㼛㼡㼟㼠㼕㼏 㼃㼍㼢㼑㻕㻌㼒㼕㼘㼠㼑㼞㼟㻌㼛㼚㻌㻸㻿㻵㻌㼎㼥㻌㼟㼑㼘㼑㼏㼠㼕㼢㼑㻌㼠㼞㼍㼚㼟㼒㼑㼞^ĞůĞĐƚŝǀĞƚƌĂŶƐĨĞƌƉƌŽĐĞƐƐďǇůĂƐĞƌdebonding

Film ƚƌĂŶƐĨĞƌ

20

18(Collaborators : NICT, Murata Manufac.,Taiyo Yuden, Asahikasei electronics, Denso, Chiba Univ. ...)TV white space cognitive radio (IEEE 802.11af)(H.Hirano, T.Kimura, I.P.Koutsaroff, M.Kodato, K.Hashimoto, M.Esashi and S.Tanaka, J. of
Micromech. Microeng., 23 (2013) 025005)

Tunable SAW filter using ferroelectric varactor

BST : Barium Strontium Titanate39(E͘/ŬĞŐĂŵŝ͕d͘zŽƐŚŝĚĂ͕͘<ŽũŝŵĂ͕,͘DŝǇĂŐƵĐŚŝ͕D͘DƵƌŽǇĂŵĂ͕^͘zŽƐŚŝĚĂ͕<͘dŽƚƐƵ͕E͘<ŽƐŚŝĚĂ͕D͘ƐĂƐŚŝ͕/ED^(2016) C2L- 23
B-ϱͿ(,͘DŝǇĂŐƵĐŚŝ͕͘<ŽũŝŵĂ͕E͘/ŬĞŐĂŵŝ͕D͘DƵƌŽǇĂŵĂ͕^͘zŽƐŚŝĚĂ͕E͘<ŽƐŚŽŝĚĂ and D͘ƐĂƐŚŝ͕IEEE NEMS (2016) A1L-B-2)

nc-Si emitter array with
TSV and 100㽢ϭϬϬĂĐƚŝǀĞ
matrix LSI(D͘ƐĂƐŚŝ͕͘<ŽũŝŵĂ͕E͘/ŬĞŐĂŵŝ͕,͘DŝǇĂŐƵĐŚŝ and E͘<ŽƐŚŝĚĂ͕DŝĐƌŽƐǇƐƚĞŵƐΘNanoeng͘͕ϭ;ϮϬϭϱͿϭϱϬϮϵͿ 21

Concept of massive parallel electron beam exposure system using nc-Si emitter8ϭϬdƌ͘ͬǁĂĨĞƌ
ϰ
=10 times / 10 beams

12

10 beams

ϰ100㽢100 active matrix
nc-Si emitter array(͘<ŽũŝŵĂ Ğƚ͘Ăů͕͘WƌŽĐ͘^W/ ůƚĞƌŶĂƚŝǀĞ>ŝƚŚŽŐƌĂƉŚǇdĞĐŚŶŽůŽŐŝĞƐs͕ϴϲϴϬ;ϮϬϭϯͿ868001-ϴϲϴϬϭϳͿ

Nano crystaline (nc) Si emitterϮϰ㻔㻹㻚㻱㼟㼍㼟㼔㼕㻘㻌㻭㻚㻷㼛㼖㼕㼙㼍㻘㻌㻺㻚㻵㼗㼑㼓㼍㼙㼕㻘㻌㻴㻚㻹㼕㼥㼍㼓㼡㼏㼔㼕 㼍㼚㼐㻌㻺㻚㻷㼛㼟㼔㼕㼐㼍㻘㻌㻹㼕㼏㼞㼛㼟㼥㼟㼠㼑㼙㼟㻌㻒㻌㻺㼍㼚㼛㼑㼚㼓㼕㼚㼑㼑㼞㼕㼚㼓 㻔㻞㻜㻝㻡㻕㻌㻝㻘㻌㻝㻡㻜㻞㻥㻔㻝㻙㻤㻕㻕㻰㼞㼕㼢㼑㼞㻌㼏㼕㼞㼏㼡㼕㼠㻌㼒㼛㼞㻌㻝㻌㼑㼘㼑㼏㼠㼞㼛㼚㻌㼟㼛㼡㼞㼏㼑㻌㼕㼚㻌㻝㻜㻜㽢㻝㻜㻜㻌㼍㼞㼞㼍㼥

22

40
27

Shared facility for industry to prototype MEMS devices (4 / 6 inch)
Hands-on-access fab.

ƐƐŽĐ͘WƌŽĨ͘<͘dŽƚƐƵ

Companies areallowed to sell
DD^ĚĞǀŝĐĞƐproduced in ƚŚĞĨĂď͘;ƐŝŶĐĞ:ƵůǇϮϬϭϯͿ

Companies which can notprepare their own facility
dispatch their employees tooperate equipment bythemselves for development
and small volume production.

ϮϱWƌŽƚŽƚǇƉĞŽĨǁƌŝƚĞƐǇƐƚĞŵǁŝƚŚ100㽢100 ĂĐƚŝǀĞŵĂƚƌŝǆĞŵŝƚƚĞƌĂƌƌĂǇ

ŽŽŬ͞ĞǀĞůŽƉŵĞŶƚŽĨŵĂƐƐŝǀĞ
parallel electron beam drawing- ĨŽƌĚŝŐŝƚĂůĨĂďƌŝĐĂƚŝŽŶŽĨ>^/͟ƉƵďůŝƐŚĞĚŝŶ:ƵŶĞϲ͕ϮϬϭϴ

Layout of the Hands-on access fab. for 4/6 inch wafer

Nishizawa memorial research centerWƌŽĨ͘ĞŵĞƌŝƚƵƐ
:ƵŶ-ich Nishizawa

Semiconductor Research Institute (1961~2008)28

Transferredfrom otherlabDonated byindustry

Newly
Installed

Equipment used
for transistor
production until
2008 (Tokin)

26

41

29

㻯㼛㼙㼙㼑㼞㼏㼕㼍㼘㼕㼦㼑㼐㻌㻹㻱㻹㻿㻌㼡㼟㼕㼚㼓㻌㼠㼔㼑 㻴㼍㼚㼐㼟㻙㼛㼚㻙㼍㼏㼏㼑㼟㼟㻌㼒㼍㼎㻚㻼㼡㼘㼟㼑㻌㼝㼡㼍㼚㼠㼡㼙㻌㼏㼍㼟㼏㼍㼐㼑㻌㼘㼍㼟㼑㼞㻌㼐㼑㼢㼑㼘㼛㼜㼑㼐㻌㼡㼟㼕㼚㼓㻌㼠㼔㼑㻌㻴㼍㼚㼐㼟㻙㼛㼚㻙㼍㼏㼏㼑㼟㼟㻌㼒㼍㼎㻚㻌㻔㻴㼍㼙㼍㼙㼍㼠㼟㼡㻌㻼㼔㼛㼠㼛㼚㼕㼏㼟㻕hƐĞƌƐŽĨƚŚĞHands-on-access ĨĂď͘

31

ϭϱϰD

dŽƚĂů͗:Wz220 M

36M

US$ 1.9 M, EUR 1.7 MhƐĞƌƐĨĞĞ

ϰϯD

Air conditioningŚĞĂƚŝŶŐ͕ůŝŐŚƚŝŶŐ

ϵϳD

PersonnelǆƉĞŶĚĂďůĞƐ͕equipment maintenance

ϮϳD

Facility charge

9M

CarriedĚŵŝŶŝƐƚƌĂƚŝǀĞ ĨŽƌǁĂƌĚ
expense 8M

Expenditure

Revenue and expenditure (FY2017)

39M

17M

BroughtĨŽƌǁĂƌĚMEXT NanotechnologyWůĂƚĨŽƌŵWƌŽũĞĐƚ

KǀĞƌŚĞĂĚ 8M
expense2M:ŽŝŶƚƌĞƐĞĂƌĐŚ

Revenue

Hands-on-access fab. users30

42㻼㼞㼛㼏㼑㼟㼟㻌㼑㼝㼡㼕㼜㼙㼑㼚㼠㻌㼐㼕㼟㼜㼘㼍㼥㻌㼞㼛㼛㼙㻿㼑㼚㼐㼍㼕㻌㻹㻱㻹㻿㻌㼟㼔㼛㼣㼞㼛㼛㼙33(MEMS Park Consortium (MEMSPC))

Sendai MEMS showroomϯϱ㻰㼑㼟㼗㻌㻶㻌㻦㻌㻵㼚㼒㼞㼍㼞㼑㼐㻌㼕㼙㼍㼓㼑㼞㻘㻌㻾㼍㼚㼓㼑㻌㼕㼙㼍㼓㼑㼞㻌㼡㼟㼕㼚㼓㻌㼛㼜㼠㼕㼏㼍㼘㻌㼟㼏㼍㼚㼚㼑㼞㻯㼍㼟㼑㻌㻭㻌㻦㻌㻵㼙㼍㼓㼕㼚㼓㻌㼍㼚㼐㻌㼛㼜㼠㼕㼏㼍㼘㻌㼙㼑㼙㼟㻘㻌㻾㻲㻌㻹㻱㻹㻿㻯㼍㼟㼑㻌㻮㻌㻦㻌㻼㼞㼑㼟㼟㼡㼞㼑㻌㼟㼑㼚㼟㼛㼞㻘㻌㻹㼕㼏㼞㼛㼜㼔㼛㼚㼑㻘㻌㻭㼏㼏㼑㼘㼑㼞㼛㼙㼑㼠㼑㼞㻯㼍㼟㼑㻌㻯㻌㻦㻌㻳㼥㼞㼛㼟㼏㼛㼜㼑㻘㻌㻹㼕㼏㼞㼛㻙㼚㼍㼚㼛㼙㼍㼏㼔㼕㼚㼕㼚㼓㻾㼍㼏㼗㻌㻷㻌㻦㻌㻰㼑㼟㼕㼓㼚㻌㼍㼚㼐㻌㼒㼍㼎㼞㼕㼏㼍㼠㼕㼛㼚㻌㼛㼒㻌㻯㻹㻻㻿㻸㻿㻵㻰㼑㼟㼗㻌㻸㻌㻦㻌㻿㼑㼙㼕㼏㼛㼚㼐㼡㼏㼠㼛㼞㻌㼕㼛㼚㻌㼟㼑㼚㼟㼛㼞㻌㻔㻵㻿㻲㻱㼀㻕㻯㼍㼟㼑㻌㻰㻌㻦㻌㻹㼕㼏㼞㼛㻌㼟㼑㼚㼟㼛㼞㼟㻌㼒㼛㼞㻌㼙㼑㼐㼕㼏㼍㼘㻌㼍㼜㼜㼘㼕㼏㼍㼠㼕㼛㼚㼟㻯㼍㼟㼑㻌㻱㻌㻦㻌㻹㼕㼏㼞㼛㻌㼒㼘㼡㼕㼐㼕㼏㼟㻘㻌㻴㼑㼠㼑㼞㼛㼓㼑㼚㼑㼛㼡㼟㻌㼕㼚㼠㼑㼓㼞㼍㼠㼕㼛㼚㻘㻌㻴㼍㼞㼟㼔㻌㼑㼚㼢㼕㼞㼛㼚㼙㼑㼚㼠㻌㼐㼑㼢㼕㼏㼑㼟㻯㼍㼟㼑㻌㻲㻌㻦㻌㻼㼛㼣㼑㼞㻌㻹㻱㻹㻿㻘㻌㻭㼏㼠㼡㼍㼠㼛㼞㼟㻯㼍㼟㼑㻌㻳㻌㻦㻌㻲㼞㼍㼡㼚㼔㼛㼒㼑㼞 㼕㼚㼟㼠㼕㼠㼡㼠㼑㻰㼑㼟㼗㻌㻹㻌㻦㻌㼕㻯㻭㻺 㻔㻹㻱㻹㻿㻌㼍㼜㼜㼘㼕㼏㼍㼠㼕㼛㼚㻌㼏㼛㼚㼠㼑㼟㼠㻕㻰㼑㼟㼗㻌㻺㻌㻦㻌㻤㽢㻤 㻵㼚㼒㼞㼍㼞㼑㼐㻌㼟㼑㼚㼟㼛㼞㻌㼍㼞㼞㼥㻯㼍㼟㼑㻌㻴㻌㻦㻌㻻㼜㼑㼚㻌㼏㼛㼘㼘㼍㼎㼛㼞㼍㼠㼕㼛㼚㻌㼣㼕㼠㼔㻌㻹㻱㻹㻿㻌㻼㻯㻌㼍㼚㼐㻌䃛㻿㻵㻯㻯㼍㼟㼑㻌㻵㻌㻦㻌㻵㻹㻱㻯ŚƚƚƉ͗ͬͬǁǁǁ͘ŵƵ㻾㼍㼏㼗㻌㻻㻌㻦㻌㻭㼣㼍㼞㼐㼟ƐŝĐ͘ƚŽŚŽŬƵ͘ĂĐ͘ũƉͬƐŚŽǁƌŽŽŵͺĞͬŝŶĚĞǆ͘Śƚŵů

http://www.mu-sic.tohoku.ac.jp/nishizawa/㻱㼤㼔㼕㼎㼕㼠㼕㼛㼚㻌㼞㼛㼛㼙㼟㻌㼕㼚㻌㻶㼡㼚㻙㼕㼏㼔㼕 㻺㼕㼟㼔㼕㼦㼍㼣㼍 㻹㼑㼙㼛㼞㼕㼍㼘㻌㻾㼑㼟㼑㼍㼞㼏㼔㻌㻯㼑㼚㼠㼑㼞㻮㼡㼟㼕㼚㼑㼟㼟㻌㼙㼍㼠㼏㼔㼕㼚㼓㻌㼞㼛㼛㼙㻴㼕㼟㼠㼛㼞㼕㼏㼍㼘㻌㼙㼡㼟㼑㼡㼙㻌㼛㼒㻌㼠㼑㼏㼔㼚㼛㼘㼛㼓㼥ϯϰMEMS WĂƌŬŽŶƐŽƌƚŝƵŵ;DD^W) 䠄ŚƚƚƉ͗ͬͬǁǁǁ͘ŵĞŵƐƉĐ͘ũƉ䠅

36

10th MEMS Engineer Forum (April Ϯϱ-Ϯϲ͕ϮϬϭϴͿ(ZǇŽŐŽŬƵ͕dŽŬǇŽͿϳϱϳĂƚƚĞŶĚĞĞƐ
11th DD^ŶŐŝŶĞĞƌ&ŽƌƵŵ;ƉƌŝůϮϱ-Ϯϲ͕ϮϬϭϵͿ;ZǇŽŐŽŬƵ͕dŽŬǇŽͿ ŚƚƚƉ͗ͬͬǁǁǁ͘ŵ-Ğ͘-Ĩ͘ŝŶĨŽͬ

MEMS intensive course (Free)

MEMS Seminar in Kawasaki AIRBIC (July 29-31, 2019)

MEMS Seminar in Toyota Inst. of Tech. (Aug.2 - 4, 2018) 72 attendees

MEMS Seminar in Kawasaki (July 31 - Aug.2, 2017) 181 attendees

MEMS Seminar in Sendai (Aug.3-5, 2016) 116 attendees

MEMS Seminar in Toyohashi (Aug.5-7, 2015) 161 attendees

MEMS Seminar in Osaka (Aug.5-7, 2014) 140 attendees

MEMS Seminar in Tsukuba Univ.(Aug.7-9, 2013)110 attendees

MEMS Seminar in Tokyo (Aug.22-24, 2012) 226 attendees

MEMS Seminar in Kyoto (Aug.9-11, 2011) 175 attendees

MEMS Seminar in Tsukuba (Aug.5-7, 2010) 211 attendees

MEMS Seminar in Nagoya (Aug.4-6, 2009) 100 attendees

MEMS Seminar in Fukuoka (Aug.20-22, 2008) 150 attendees

MEMS Seminar in Sendai (Aug. 22-24, 2007) 75 attendees

MEMS Seminar in Tokyo (Aug. 23-25, 2006) 280 attendeesŚƚƚƉ͗ͬͬǁǁǁ͘ŵƵƐŝĐ͘ƚŽŚŽŬƵ͘ĂĐ͘ũƉͬŵƵƐĞƵŵͬŝŶĚĞǆ͘Śƚŵů,ŝƐƚŽƌŝĐĂůDƵƐĞƵŵŽĨTechnology

43

Training of Fabrication

Fabrication;ϰŝŶĐŚƉƌŽĐĞƐƐͿ

3 months
30 ~ 60 d

Testing~ 10 dCompany

Facility for prototyping

Basic

Lowing barriers

Government research institutes

University

Government research institutes

University

Government research institutes

University37ǆĂŵƉůĞŽĨĚĞǀĞůŽƉŵĞŶƚĂŶĚcommercialization(Pressure sensor)WƌĞƐĞŶƚĂƚŝŽŶ͕
report3d

Rohm ĸ Kionics (USA) [Accelerometer]
between sectors
Murata manufacturing ĸ VTI (Finland) [Accelerometer]
is expected ĨŽƌ
MegaChips ĸ SiTime (USA) [MEMS oscillator]
open collaboration
Alps ĸ Qualtre (USA) [Bulk acoustic gyro]
Sharp ĸ Pixtronix (Qualcomm) (USA) [Display]
TDK ĸ EPCOS (Germany) [RF components], TRONICS(France) [MEMS],
Invensense (USA) [Gyro, Combination sensor]
39

Application

In future

Foreign companies

Company

Company

At present

In the past^ŝŶĐĞƉƌ͘ϮϬϬϳ͘&ĞĞϭŵŝůůŝŽŶǇĞŶ͘dƌĂŝŶĞĞƉĂƌƚŝĐŝƉĂƚĞǁŝƚŚŽǁŶƐƵďũĞĐƚ͘ϭϲĐŽŵƉĂŶŝĞƐƉĂƌƚŝĐŝƉĂƚĞĚ͘

MEMS Training Program in Sendai MEMS PC

DesignLectures on Internet
SchoolWůĂŶŶŝŶŐ͕
design10 ~ 20 dCompanyProf.
Takahito
Ono(NEMS)

38

40

Prof.
Assos.Prof. Assos.Prof. Assos.Prof.
Yoichi
KentaroMasanori
ShinyaHaga
Totsu
Muroyama Yoshida(Medical(Open(LSI design)(Piezo MEMS)
applications) collaboration)

Asso. Prof.
Jörg Frömel(Fraunhofer
project center)

Faculty of Eng. (Tohoku Univ.)(Initial stage prototyping)

Advantest component Co.Ltd.
(Contract production)

Acknowledgment to collaborators

Prof.
Shuji
Tanaka(RF MEMS)

by D͘ƐĂƐŚŝ andd͘KŶŽ (DŽƌŝŬŝƚĂ
shuppan͕DĂǇ͕ϮϬϭϲ);ŝŶ:ĂƉĂŶĞƐĞͿ

Future MEMS Fusion with LSI -by D͘ƐĂƐŚŝ (DŽƌŝŬŝƚĂ
shuppan͕ϮϬϬϵͿĂƐŝĐƐŽĨDD^Open collaboration by MEMSPC in Sendai

Micro System Integration Center(Tohoku Univ.) (Hands-on access fab.)

MEMS core Co.Ltd.
(Contract development)

MEMS Park
Consortium(MEMSPC)

Session 1【Sensor · Actuator / センサー・アクチュエーター】

Session 1【Sensor · Actuator /センサー・アクチュエーター】

“R&D of sensors and actuators toward agriculture and healthcare
applications”「農業とヘルスケアへの応用を目指したセンサ・アクチュエータの研究開発」

Jin Kawakita (National Institute for Materials Science, Japan)
川喜多 仁（物質・材料研究機構）“Nanotechnology-enabled Sub-nano-Watt Integrated Healthcare IoT~Stand-Alone Energy-Autonomous Continuous Blood Glucose
Monitoring Contact Lenses~”「ナノテク応用サブナノワット集積ヘルスケア IoT〜単独動作可能・電力自立持続血糖モニタリングコンタクト〜」

Kiichi Niitsu (Nagoya University, Japan)
新津 葵一（名古屋大学）

47

農業とヘルスケアへの応用を目指した
センサ・アクチュエータの研究開発
川喜多仁

国立研究開発法人 物質・材料研究機構〒 305-0044 茨城県つくば市並木 1-1

概要
我が国が目指すべき未来社会の姿としてSociety5.0 が提唱されています。Society5.0 では、フィジカル空間（現実空間）における情報を複数の多様なセンサを用いて大量のデータ（ビッグデータ）として収集し、サイバー空間（仮想空間）
における解析を通じてフィジカル空間（現実空間）に新たな価値が提供されることになります（図１）。例えば、医療や介護においては、
脳活動、呼気、バイオマーカーといった生体情報を収集・解析することで、仮想現実（VR）
を併用

図 1．Society 5.0 におけるセンサとアクチュエータの位置づけした手術、瘤や腫瘍のクリッピングといった体への負荷の少ない外科手術、あるいは薬物徐放のためのマイクロポンプを搭載したスマートパッチなどが実現することになります。他方、農業においては、温度や湿度、CO2 などの環境情報や、果物を対象とした場合には糖度やビタミ
ン C、香りといった生体情報を収集・解析し、ヒーターやファン、農薬散布などの状態を制御することで、生育や流通時の品質や鮮度の向上が実現することになります。しかしながら、現状では、機能・特性やサイズ、電力といった必要な要件を満たすセンサおよびアクチュエータが不足しています。
そこで、従来には存在しない、あるいは既存の性能を凌駕するセンサおよびアクチュエータ
を提供するため、NIMS において 2018 年 6 月にセンサ・アクチュエータの研究開発を行うセンターおよびプロジェクトが発足しました。このプロジェクトでは、社会的な要請・要求を踏ま48

え、デバイスの具体的な応用先として、農業とヘルスケアを設定し、環境・生体情報をセンシング可能な低消費電力・小型デバイスの開発、軽量・小型・柔軟に動作するソフトアクチュエー
タの研究、デバイスを駆動するための自立型電源とフレキシブル回路（配線・電極）形成技術の開拓をターゲットとしています。さらに、センサ開発、アクチュエータ研究、作動機能開拓の 3 つの領域を設定し、それぞれの領域において、課題設定型研究テーマに加え、公募提案型
研究テーマを合わせて実施するとともに、国内外の大学・公的研究機関、民間企業等との研究連携および出口開拓を行うことで、研究開発を総合的に推進しています。
具体的な研究テーマとして、センサ開発では、湿潤・生体分子・菌といった液体、嗅覚・生体ガス・NOx といった気体、微小な磁気を検出対象として、センサデバイスの開発を行ってします。また、アクチュエータ研究では、新規材料開発に加え、形状記憶ポリマー、巨大膨潤無機層状物質、
イオン／液晶分子、ナノシート積層 MEMS の活用によるアクチュエーティングに取り組んでいます。さらに、作動機能開拓では、室温での回路・電極形成技術に加え、自立型モジュールに向けた薄膜蓄電、熱電や光発電の開発を進めています。
本プロジェクトを通じて、一つでも多くのデバイス・システムが少しでも早く社会実装され、Society5.0 が実現することへの貢献を目指しています。

川喜多

仁（かわきた じん）＜ CV ＞
国立研究開発法人物質・材料研究機構センサ・アクチュエータ研究開発
センター長
合同会社アキューゼ技術担当役員
千葉工業大学客員教授
専門：電気化学49

50,QWHUQDWLRQDO&HQWHUIRU
6HQVRUDQG$FWXDWRU

M3 (Program for Strengthening Innovative Materials Development)

Jin Kawakita

National Institute for Materials Science

agriculture and healthcare applications

R&D of sensors and actuators towardBiometric information

Physical space

Drug release (pump)

Tumor clipping

https://www.nikkan.co.jp/articles/view/00451358
http://www.e-oishasan.net/site/izumi/treat01.html
https://thebridge.jp/2017/06/holoeyes-series-a-round-funding

Lack of sensors & actuators tomeet required characteristics

љ

9 Less physical burden on surgery
9 Smart patch
9 etc

Actuator

VR surgery

https://www.keidanrensdgs.com/society5-0forsdgs-jp
https://www8.cao.go.jp/cstp/society5_0/index.html

Cyber Space

Healthcare

Sensorhttp://meg.aalip.jp/vsEEG/vsEEG.html
http://pr.fujitsu.com/jp/news/2016/04/18.html
https://tech.nikkeibp.co.jp/it/atcl/news/17/122502914/
https://www.nec-solutioninnovators.co.jp/csr/report/2017/act2.html

Biomarkers

Exhalation

Brain condition

New
value

RealizeэAccomplish SDGs

Sensor and actuator for Society5.0

Food

TraficManufacture

EnergyAgri

Physical space

Cyber space

Healthcare

Sensorinformation

Society5.0

Society5.0 and SDGs

4



51

Agri

Physical space

Cyber space

Actuator

Lack of sensor devices to meetrequirements (characteristics,
size, electricity)љ

Improvement of efficiency, quality,
freshness on growth, storage,
distribution

SensorPesticide spraying

Ventilation

FanWKHPHVPHPEHUV WKHPHVPHPEHUVPeer-review and plan- change

WKHPHVPHPEHUV WKHPH
PHPEHUV

3 themes
33 members
Open-proposed䠄PRESTOtype) research䠄Start on 2018/07/22䠅

Task-assigned䠄CRESTtype䠅 research䠄Start on 2018/5/7䠅

As of 2018/12/18

Whole progress meeting and individual correspondence

WKHPHVPHPEHUVOperatingfunction
regionActuator
research
RegionSensordevelopment
RegionCenter for Sensor and Actuator (CFSN)
䠄Start on 2018/06/01䠅

R&D project of sensor and actuator in NIMS

https://fineseed.net/farm/
https://zuuonline.com/archives/120511
http://usaginonoukasan.com/post-224.html
http://www.matsumotosangyou.co.jp/business/aircon.html

Sugar degree, Vitamin C,
released gas

Biometric information

Temp., RH, CO2, Brightness

Environmental information

Sensor and actuator for Society5.0

7

5

R&D
Collaboration

Univ.

Center for sensor andactuator (CFSN)

International

National Lab.

PRISM

Company

Inter center

National pjct

䞉Sensor develop region
䞉Actuator research region
䞉Operating functions region

Inside NIMS

R&D system of sensor and actuator

Application
exploring䛄Development of working devices as neverbefore/beyond existing, based on materials research

Operating functions
Exploring of self-supplying power source and fabrication
technology of flexible circuit

Actuators
Research on soft actuators working with light weight/small
size/flexibility toward healthcare application

Sensors
Development of low power consumption/small devices
capable of sensing environmental/biometric information
toward agri/healthcare applications

Targets of R&D for sensors and actuators

8

6

52

Bacteria<Okamoto>

Biomolecules<Iwanaga>

䝬䝣䝷䞊
᤼ฟ䜺䝇

NOx
<Miyazaki>

Biogas<Saitoh>Olfactory<Yoshikawa>

Moisture<Kawakita>

Detection of nanomagnetic particle

MI-method<He>

MR-method<Nakatani>

Magnetic sensor

䛂Thermoelectric module䛃䛂Photovoltaic under low light intensity䛃䖃 Shirai䛂Flexible
thermoelectricity䛃䖃 Mori

䖃 Shinohara

䛂Thin film battery䛃䖃 Ohnishi

䛂Small-size thermoelectricity䛃䛂3D flexible
circuit technology䛃䖃 Minari

䛆CREST-type䛇䖃 Takagiwa

䛆PRESTO-type䛇㓄⥺ᇶᯈ

Themes and members
meof operating functions

AutonomousA
Autonom
modulePRESTO
type

CREST
type

Gas sensor

Liquid sensor

Themes and members of sensor development

11

9

- +

NakuraIkeda
0(06RI
Oayer-stacking
Nano sheet

Research topics
will be introduced on presentation.

Ionic-liquid crystal
molecules

YoshioOFFঞ‫ش‬२‫୾ش‬ખೝഓ॑૗इॊ

Suzukiॢছইख़থ൬੪஑ॼঀ३‫ॺش‬ॢছইख़থ෷৲஑ॼঀ३‫ॺش‬
ॢছইख़থ

Ma

Takai

Giant swelling layermaterial

Aimi

Ebara

+

Kobayashi Sugiyasu Nakanishi

Development of new actuator material

Shape memory
polymer

PESTO-type

Takeuchi

CREST-type

Themes and members of actuator research

12

10

ON

53

13

Toward agriculture/healthcare applications, low power
consumption/small sensing devices forenvironmental/biometric information, soft actuators working
with light weight/small size/flexibility, and self-supplying powersource and fabrication technology of flexible circuit are being
researched and developed.
Task-assigned and open-proposed themes are executed
through research collaboration and application exploring withvarious organizations.
Working devices will be developed, based on materials research.

In order to realize Society5.0, R&D center and project on novel/
superior sensors and actuators are on-going in NIMS.

Summaryナノテク応用サブナノワット集積ヘルスケア IoT〜単独動作可能・電力自立持続血糖モニタリングコンタクト〜
Nanotechnology-enabled Sub-nano-Watt Integrated Healthcare IoT ~StandAlone Energy-Autonomous Continuous Blood Glucose Monitoring Contact Lenses ~1,2

新津葵一 (Kiichi Niitsu) E-mail: niitsu@nuee.nagoya-u.ac.jp
1

2

国立大学法人名古屋大学 大学院工学研究科 ,愛知県名古屋市千種区不老町

国立研究開発法人 科学技術振興機構 さきがけ
埼玉県川口市本町 4-1-8 川口センタービル

概要
ナノテクノロジーは、IoT の高性能化に欠かせない基盤技術であり、テクノロジドライバです。本
講演においては、ナノテクノロジーを活用した、サブナノワット集積ヘルスケア IoT の研究開発事
例を紹介いたします。具体的には、単独動作可能な、電力自立の持続血糖モニタリングコンタク
トレンズに関する研究開発事例について紹介いたします。本研究開発を通じて、すべての人に健康と福祉を提供することを目指します。

I. 研究背景
糖尿病の治療・予防においては、患者が自身の血糖値を継続的に把握し、血糖値をコントロー
ルすることが大変重要です。近年、継続して血糖値をモニタリングすることに対する需要が高まっていますが、皮下にセンサーを埋め込むなど侵襲性（体内を傷つける）があり、また、高価でもあるため、幅広い活用や予防への展開が困難でした。一方、血糖濃度と相関のある涙液糖濃度に着目したコンタクトレンズ型継続血糖モニタリング技術も注目を浴びていますが、従来の技術では無線電力伝送により電気を供給しており、給電専用のメガネ型端末と同時に使用する必要がありました。

II. ヘルスケア IoT の開発
発電・センシング一体型血糖センサー（発電とセンシングを同時に行うセンサー技術）を開発
し、外部からの電気供給を必要としない持続型血糖モニタリングコンタクトレンズを試作しました（図１）。血糖濃度と相関のある涙液糖濃度によってグルコース発電素子から出力電圧が変化しますが、半導体集積回路を用いてこの出力電圧を無線発信頻度へと変換することで発電とセンシングの同時動作を実現しています。発電とセンシングを同時に行う固体素子型グルコース発電
素子は、
わずか 0.6 mm 角と世界最小クラスで、涙液に含まれる糖（グルコース）を基に１ナノワッ
ト以上の電力を生成します。また、データを送信する半導体無線送信器回路技術についても、わずか 0.385 mm 角と世界最小クラスで、従来の 1 万分の１程度の 0.27 ナノワット（電源電圧は 0.165ボルト）で駆動させることに成功しました。この 2 つの技術を融合し、涙液に含まれる糖をモニタリングしながら、必要な電力を生成することも可能になりました。これらにより、給電用のメガネ型端末も不要になり、コンタクトレンズを装着するだけで継続的に血糖値をモニタリングできます。
54

ヨస⿦⨨䛾䝁䞁䝍䜽䝖䝺䞁䝈ᦚ㍕෗┿↓⥺㏦ಙ(ᾦᾮ⢾⃰ᗘ䛻ᛂ䛨䛶Ⓨಙ㢖ᗘ䛜ኚ໬)㞟✚ᆺ༙ᑟయ㏦ಙᶵᅇ㊰(ᾦᾮ⢾⃰ᗘ䜢↓⥺㏦ಙ㢖ᗘ䛻ኚ᥮)䝏䝱䞊䝆䝫䞁䝥
ᅇ㊰
䜾䝹䝁䞊䝇
Ⓨ㟁⣲Ꮚ

=

⮬ᕫⓎ᣺ᆺ
2ಸ᪼ᅽ
ᅇ㊰

㟁ຊ※

&

LC 䝟䝽䞊
Ⓨ᣺ᅇ㊰~⾑⢾⃰ᗘ᥎⛣(ᾦᾮ⢾⃰ᗘ䛸┦㛵)60 mg/dL
120 mg/dL

ไᚚᅇ㊰

䝉䞁䝅䞁䜾
䝖䝷䞁䝇
䝕䝳䞊䝃

䜾䝹䝁䞊䝇
Ⓨ㟁⣲Ꮚ
(0.6mmゅ)༙ᑟయ
㏦ಙᶵᅇ㊰(385Pmゅ)ヨస⿦⨨䛾෗┿(ᕥ䛜༙ᑟయ㏦ಙᶵᅇ㊰䛷䚸ྑ䛜䜾䝹䝁䞊䝇Ⓨ㟁⣲Ꮚ䚹䝣䜱䝹䝮ᇶᯈୖ䛻ᐇ⿦)ධຊ㟁ᅽ2ಸ䛻᪼ᅽ䛥䜜䛯㟁ᅽ

[V]

᫬㛫

᫬㛫

䜾䝹䝁䞊䝇Ⓨ㟁⣲Ꮚ䛾ฟຊ㟁ᅽ䝟䝽䞊Ⓨ᣺ᅇ㊰䛾Ⓨ᣺㢖ᗘ᫬㛫ᾦᾮ⢾⃰ᗘ(⾑⢾⃰ᗘ䛸
┦㛵䛒䜚)

[kHz]

[V]

[mg/dL]䛥䜙䛻᪼ᅽ䛥䜜䛯㟁ᅽ㼀᫬㛫
↓⥺㏦ಙ㢖ᗘ

図 1．単独動作可能・電力自立持続血糖モニタリングコンタクトの概要図

Reference［1］K. Hayashi, S. Arata, S. Murakami, Y. Nishio, A. Kobayashi, and K. Niitsu, IEEE Transactions on Circuits andSystems II, vol. 65, no. 10, pp. 1360-1364. (Open Access)新津葵一（にいつ きいち）2006 年慶應義塾大学理工学部卒業．2008 年同大学院修士課程修了．同年日本学術振興会特別研究員（DC1）．同年グローバル COE プログラム RA．2010 年同大学
院博士課程修了．同年群馬大学大学院工学研究科助教．2012 年名古屋大学大学院
工学研究科講師．2015 年国立研究開発法人 科学技術振興機構 さきがけ研究者（兼任）．2018 年名古屋大学大学院工学研究科准教授．バイオ・医療やパワーエレクト
ロニクスに向けた高エネルギー効率半導体集積回路技術に関する研究に従事．
2006 年慶応工学会賞受賞．2007 年猪瀬学術奨励賞受賞．2008 年 IEEE SSCS Japan Chapter Young ResearcherAward 受賞．2009 年 IEEE SSCS Japan Chapter Academic Research Award, 藤原賞受賞．2011 年丹羽保次郎記念
論文賞，船井研究奨励賞，安藤博記念学術奨励賞，エリクソンヤングサイエンティストアワード受賞．2012
年 IEEE/ACM Asia-South Paci¿c Design Automation Conference 2012 University LSI Design Contest Design Award 受賞，2013 年エヌエフ基金研究開発奨励賞受賞，2014 年赤崎賞，IEEE 名古屋支部若手奨励賞受賞，2016 年 愛
知県若手研究者イノベーション創出奨励事業 わかしゃち奨励賞 優秀提案賞，IEEE Biomedical Circuits andSystems Conference 2016(BioCAS 2016) Best Paper Award, 2017 年 文部科学大臣表彰 若手科学者賞受賞．2018 年
第 4 回 ( 平成 29 年度 ) 末松安晴賞，IEEE Biomedical Circuits and Systems Conference 2018 (BioCAS 2018) Best
Live Demonstration Award 受賞．IEEE，電子情報通信学会，応用物理学会会員．博士（工学）．

55

56

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&RS\ULJKW1DJR\D8QLYHUVLW\$OO5LJKWV5HVHUYHGz ০ফ২রप৿੟ৰୡ॑৫઩घॊz َ৅ਗ਼७থ३থॢ঳৬஑ૐ஋७থ१ੵُ৾भଡണ॑৯
੐ख‫ু౎ؚ‬১‫ق‬ຜৣੌ௶৑ସั৔‫؞‬ᏹั৔ഷႇঔॽॱ
জথॢषभன৫भ૭ચਙुർढथःऎ‫ك‬ਗ਼ৡঽয়ಲਢഷႇகঔॽॱজথॢ३५ॸ঒भ೾৒ಖ২पम‫ؚ‬ऽटऽटୖ਻ऋँॊ

ୖ਻ध০৏भன஦



Session 2【nanotech 2018 award lecture / nano tech 大賞 2018 講演】

Session 2【nanotech 2018 award lecture /nano tech 大賞 2018 講演】

“Nanotechnology in IoT era”
「IoT 時代のナノテクノロジー」

Shinichi Yorozu (NEC Corporation, Japan)
萬 伸一（日本電気株式会社）

63

IoT 時代のナノテクノロジー
萬
日本電気株式会社〒 305-8501

伸一

システムプラットフォーム研究所
茨城県つくば市御幸が丘 34

アブストラクト
IoT 技術が進展し、実社会の課題解決や利便性向上に情報通信技術を広く活用することが当たり前のことになってきた。Society5.0 という新たな社会に対する考え方にも同様な構造が謳われている。AI に代表される情報処理技術の進展でサイバー空間に様々な価値提供の可能性が出てきた。実空間における進展のカギを握る有力な基盤技術はナノテクノロジーであろう。サイバーと実空間との接続の深化や実空間そのものを豊かにすることが期待されている。また、量子コンピュータのようにナノテクノロジーが情報処理技術そのものを変革する可能性もある。
本講演では研究開発事例に基づきサイバーでのデータ分析の起点となるセンシングの高度化やデータ処理の高性能化など、社会価値創出に貢献するナノテクノロジーを展望する。

I. はじめにSociety5.0 が提唱され 1、実空間とサイバー空間を効果的に組み合わせ、経済的発展と社会的課題の解決を両立させる動きが本格化してきた。図１はシステム構造と関連する基盤技術である。実空間に関わる技術としてナノテクノロジーがあげられている。ナノテクノロジーに対する実空間側の技術としての期待が窺える。

図 1．Society5.0 のシステム構造と基盤技術

II. ナノテクノロジーがもたらす価値
実空間とサイバー空間をより深く結びつける技術としてセンシング技術があげられる。社会価
値をあげるポイントは取得した情報の量と質であるが、そのためにはセンサの基本性能（感度や帯域のような）の向上ばかりではなく、データを取得できる環境、センサへの駆動電力供給
方法、データを取得したその場でどれだけ情報を整理できるか、などの多様な要素が関係する。
これらの機能はソフトウエア的な処理だけでは実現不可能でモノ側の技術革新が必要である。
ミクロ・量子レベルで対象の物性制御・機能発現を特徴とするナノテクノロジーが大きな役割を果たすことが期待できる。以下、NEC における研究事例を取り上げ価値の一端を考えたい。
①光（赤外）センシングデバイス：量子ドットや量子井戸構造を用いてバンド構造を制御す
れば検出する波長と感度を自由に設計できるデバイスが実現できる。加えて信号源の強度をナノ構造中で共鳴させ信号感度をあげるプラズモニクスを用いたアンテナも同じデバイ
ス中に付加可能である。観測したい対象が出す特徴的な波長がわかれば、その波長を超高感度に検出するセンサを作ることができる。例えば特徴的な赤外線スペクトルを有する高付加価値鉱物を広く探索できるリモートセンシングに活用することができる。赤外領域は今後拡大するであろう物質の内部構造など内部情報に起因した情報に関わり、活用が期待される。
64

②大面積・フレキシブルシートデバイス：データを取得する対象は必ずしも平たんではなく、実空間の対象物は通常大きく広い範囲から一括して取得したいケースがある。カメラの活用が一般的であるがカメラを使えない／カメラでは情報が取れない（圧力など力学系情報など）場合も今後は増えるだろう。対象物の形状に合わせた実装が可能なフレキシブルな基板上に電子回路を構築しセンシングデバイスとして活用することが期待される。回路の作成プ
ロセス、作成に使う材料開発には様々なナノテクノロジーが使われる。物流やリテール領
域での物品検知、張り付け型の人体情報の取得への応用が有効として検討が進んでいる。
③フレキシブル・エネルギーハーベスティングデバイス：センサを駆動する電源技術として電池があげられるが、電池交換のコストや場所の制約が懸念される。対象物そのものが持
つ熱や振動から駆動電力を回収する技術も有力な解となりうる。熱電デバイスはその効率や構造の複雑さが指摘されているが、磁性体中のスピン流を活用することでシンプルな構造で高効率の変換が実現できる可能性がある。これまで使いきれなかった熱エネルギーを価値構築に活用できるだろう。薄型でフレキシブルな構造をとることでこれまで取得が困難だった熱流のセンシングという新しい応用も期待される。
④原子スイッチ：従来の LSI では、機能実現は回路により行われてきた。FPGA の機能切り替え用スイッチもメモリ回路で構成されているが、それをシンプルなスイッチデバイスで置き換えられれば、消費電力や LSI としての面積（コスト）、動作速度を大幅に削減できる。
センサデバイスのデータをその場で処理し高品質化するチップとしての活用が期待できる。
⑤量子コンピュータ：量子重ね合わせ状態を集積することでこれまでと全く異なる演算原理
での高性能コンピューティングが期待されている。超伝導、半導体量子ドットなどが集積性・機能性から有力視されている。デバイス動作原理・設計・製造はナノテクノロジーが切り開いてきた技術が活用されている。今後のブレークスルーが期待される。

III. まとめIoT 時代を迎え、実空間とサイバー空間との融合が進んでいく。ナノテクノロジーは実空間側に立ってこの融合を支えるキーテクノロジーとなることが期待される。ナノテクノロジーは米国がイニシアチブをとり本格化してから 10 年以上が過ぎ、幅の広い技術蓄積がなされてきた。
これからが社会課題解決にナノテクノロジーが貢献していく本番であると言えるだろう。
Reference[1] http://www.a൵rc.ma൵.go.jp/docs/commitee/Renkei/attach/pdf/Renkei_Symposium20190602-4.pdf

萬伸一（よろず しんいち）< 略歴 >
1993 年 東京大学大学院工学系研究科博士課程修了。博士（工学）1993 年 日本電気（株）入社 基礎研究所 超伝導デバイスの研究開発に従事
1997 年〜 1998 年 ニューヨーク州立大ストニーブルック校 研究員
2005 年 基礎・環境研究所 研究部長 以降、量子・ナノテクノロジー領域の研究開発及びマネジメントに従事
2015 年 スマートエネルギー研究所 所長代理
2018 年 システムプラットフォーム研究所 主席技術主幹
現在に至る

65

Session 3【Overseas Nanotechnology User Facility Programs / 海外ナノテク共用事業紹介】

Session 3【Overseas Nanotechnology User Facility
Programs / 海外ナノテク共用事業紹介】

“Road to ultra-low switching Energy Memories to artificial
neurons”「ニューラル電子デバイスへの道」

Thirumalai Venky Venkatesan (National University of Singapore, Singapore)“Open Access Analytical Services for Nanotechnology,
with emphasis on Surface Analysis”「表面分析を基盤とした分析サービスのオープンアクセス環境」

Peter J. Cumpson (University of New South Wales, Australia)“Emerging understanding of anthropogenic and natural
nanoparticle impacts on Earth systems – a new paradigm forearth science –”「人為的及び自然ナノ粒子の地球システムへの影響の新しい理解−地球科学における新たなパラダイム−」

Mitsuhiro Murayama (Virginia Tech, USA)69

5RDGWRXOWUDORZVZLWFKLQJ(QHUJ\0HPRULHVWRDUWL¿FLDOQHXURQV
T. Venkatesan1, Sreetosh Goswami1, Li Changjian1, Chen Jingsheng1,
Abhijeet Patra1, Viknish Krishnan Kutty1 and Sreebrata Goswami2
1

NUSNNI, T-Labs Building, National University of Singapore, Singapore 117411
2
Association for Cultivation of Sciences, Jadavpur Kolkata, India 700032

Abstract$UWL¿FLDOLQWHOOLJHQFH $, KDVEHHQKHUDOGHGDVWKHÀDJEHDUHURIWKHIRXUWKLQGXVWULDOUHYROXWLRQ%XWLW
comes with a cost and that is computing power. It is projected that by 2040, we will need more computing
HQHUJ\WKDQWKHWRWDOWHUUHVWULDOHQHUJ\0HPRU\GHYLFHVDUHUHVSRQVLEOHIRUDVLJQL¿FDQWIUDFWLRQRIWKH
energy consumed in electronic systems- typically 25% in a laptop and 50% in a server station. Reducing
WKHHQHUJ\FRQVXPSWLRQLQPHPRULHVLVDQLPSRUWDQWJRDO)RUWKHHYROYLQJ¿HOGRIDUWL¿FLDOLQWHOOLJHQFH
the compatible devices must simulate a neuron in order to meet the low energy required for brain-likefunctions. We are working on three different approaches towards these problems- one involving anorganic metal centred azo complex, the other involving oxide based ferroelectric tunnel junctions and thelast involving real live neuronal circuits.
Experimental Results
Organic Approach: With our organic resistive memories built on oxide surfaces (Fig. 1) are robust,
stable (operating from -40 to 80C for >10^6s) and enduring (>10^12 cycles) exceeding the ITRSURDGPDSVSHFL¿FDWLRQVLJQL¿FDQWO\GHPRQVWUDWLQJWKHYLDELOLW\RIWKLVV\VWHPIRUSUDFWLFDODSSOLFDWLRQV
Besides meeting industrial metrices, this work implements in-situ spectroscopic platforms to detectmolecular states of devices while in operation - an elusive goal in organic electronics. The mechanistic
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HYHQVWDWHGHYLFHV6XFKGHYLFHVFDQR൵HUDERRQWRWKHQHXURPRUSKLFWHFKQRORJ\DQGEUDLQLQVSLUHG
computing which are still in search of ideal material candidates for neuromorphic devices.
Our devices are scalable from micron size to 50nm2 (measured with a c-AFM tip). With scaling theswitching voltage drops from a maximum of 4 Volts (in a micron device) to 120mV (to a nano-device) (Fig.
 7KHQDQRVWUXFWXUHVDFWDVVHHGLQJSRLQWVRIORFDOO\HQKDQFHG¿HOGVVLJQL¿FDQWO\ORZHULQJWKHFKDUJH
injection barrier. With these devices, we are now able to reach100aJ switching energy, at least 4 orders
superior to any other resistive memory.

Fig. 1. The molecule is a Ru centred Azo ligand based complex. The azo group can have three charged (redox)
states and these molecules are spin coated on an ITO film with metal electrodes on top1.

Fig.2. As the device size is reduced (micron2) the switching voltage progressively decreases from 4V to 0.12V (50nm2).

70

Table 1
Parameter
Read Current
W/E time
Write Cycles
Write Voltage
Read Voltage

ITRS Projection
>10nA
~ns
>1010
<0.6V
<0.2V

Achieved Values
1mA
<30ns
>1012
0.15V
<.05V

Best Organic Device
200 fA at 400nm2
ms
104
1.5V
.1V

Write energy<1pJ

200aJ (area 50 nm2)
Assuming 30ns, 1mA

Not reported

Oxide Approach:2QWKHR[LGHIURQWWKHVLJQL¿FDQWUHVXOWVDUHWKDWIHUURHOHFWULFLW\LVVHHQHYHQLQRQH
RUWZRDWRPLFOD\HUVRI%D7L2RU%L)H2UHVXOWLQJLQIHUURHOHFWULFWXQQHOMXQFWLRQVZLWKXVDEOH2Q2൵
ratios2-5. Oxygen vacancy motion can also play an important role in changing the device characteristics
leading to synaptic characteristics and lead to multiple memory states (Fig. 3).
Live Neuronal circuits: Last but not the least, oxide surfaces can be utilized to force neurons togrow at specific places on a surface giving the potential for fabricating live neuronal circuits. Using
lithographically etched channels the axons could be guided to create a 2D matrix of neurons and if such
FLUFXLWVFRXOGEHPDGHUHSURGXFLEO\ZLWKOLYHQHXURQVWKLVZRXOGOHDGWRDVLJQL¿FDQWXQGHUVWDQGLQJRI
neuronal communications and also understanding neurodegeneration process and also developing drugs tocombat neurodegeneration.
10

5

10

4

10

3

10

2

b

10

5

10

4

10

3

10

2

c

0.05 Torr

-4

-2

2

10

4

10

3

10

-4

-2

0

f

0

10

4

10

3

10

2

d

0.1 Torr
10 mins OA

4

10

6

10

5

-4

-2

0

g
10

2

Voltage (V)

4

-4

-2

0

2

Voltage (V)24Voltage (V)

10

5

10

4

10

3

10

2

0.1 Torr
3 h OA

-4

5

-4

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0

2

Voltage (V)

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0

4

2

4

Voltage (V)h0.1 Torr
3 h OA

4

10

6

0.1 Torr
30 mins OA

2

-2

2

Voltage (V)0.1 Torr-4

5

0.1 Torr

4

Voltage (V)

e
R (:)

0

10

R (:)

R (:)

a

10

6

10

4

10

2

BTO
STO

0

10

20

30

Time (minutes)

Fig. 3. Combination of ferroelectric tunnel junction and oxygen vacancy motion can lead to multi-state memory4

References
1. Sreetosh Goswami, et al., Nature Materials, 16, 1216 (2017)
2. C. J. Li, et al., Nano Letters 15 (4) 2568–2573 (2015)
3. Han Wanget al., Nature Comm. 9, 3319 (2018)
4. Weiming Lü, et al., Advanced Materials - In Print
5. Rui Guo, et al., ACS Applied Materials and Interfaces, 10, 12862 (2018)

T. Venkatesan- A Short Biography
Prof. T. Venkatesan is currently the Director of the Nano Institute at the National University of Singapore (NUSNNI) where he is a Professor of ECE, Physics, MSE and NGS. He
wore various hats at Bell Labs and Bellcore before becoming a Professor at University of
Maryland. As the inventor of the pulsed laser deposition (PLD) process, he has over 740
papers and 30 patents and is globally among the top one hundred physicists (ranked at 66
in 2000) in terms of his citations (Over 42,700 with a hirsch Index of 105-Google Scholar). He has graduated over 45 PhDs, 35 Post Docs and over 35 undergraduates. He is also
WKHIRXQGHUDQG&KDLUPDQRI1HRFHUDDFRPSDQ\VSHFLDOL]LQJLQWKHDUHDRI3/'DQGPDJQHWLF¿HOGLPDJLQJV\VWHPVClose to 10 of the researchers (PhD students and Post Docs) under him have become entrepreneurs starting over 17 different commercial enterprises. He is a Fellow of the APS, winner of the Bellcore Award of excellence, Guest Professor atTsinghua University, Winner of the George E. Pake Prize awarded by APS (2012), President’s gold medal of the Institute
RI3K\VLFV6LQJDSRUH$FDGHPLFLDQRIWKH$VLD3DFL¿F$FDGHP\RI0DWHULDOV)HOORZRIWKH:RUOG,QQRYDWLRQ)RUXP
was a member of the Physics Policy Committee (Washington DC), the Board of Visitors at UMD and the Chairman, Forum of Industry and Applications of Physics at APS. He was awarded the outstanding alumnus award from two Indian
Institute of Technologies- Kanpur (2015) and Kharagpur (2016), India.

71

72

Our System

NUSNNI -NANOCORE, NATIONAL U N I V E RSIT Y O F S I N G A P O R E

T. V E N K ATESAN

Route to Low Energy Memories and Neurons

The Memristive J(V)
100
80
60
40
20
10
1

122
47
38
29
31
26
28

Total- 321

Top Electrode Size(um)

# Devices

50%-Power consumed by Memory

20%- of global Power consumed by data
centers in 2025

humans thinking actively

1.6x 1011 watts- Power consumed by all

consumed by data centers in 2016

4.16 x 1014 watts- Power2 x 1010-Transistors in Intel Processor 20172

73

State-0

State-1

Goswami, Sreetosh, et al. Nature materials 16.12 (2017): 1216.

Mode-0Goswami, Sreetosh, et al. Nature materials 16.12 (2017): 1216.

Effect of counterions

Mode-2Mode-1

Ligand Redox States

7

5

State-2

OFF
5 (5)ON 4(4)500nm

8Goswami,Goswamwawam
ammi Sreetosh,sh, et al. Nature materials 16.12
12
1
2 (2017):(2017)
(2017
2017)
2017
2
201
017)
017
01
17
7): 1
1216
121
12
1216.
216
21
2
16
1
6.

OFF
1 (1)

Origin of the hysteresis?

Goswami, Sreetosh, et al. Nature materials 16.12 (2017): 1216.

In-situ Raman

6

OFF
(2)
2

ON3 (3)

450

600
750
Wavelength (nm)900

B

Raman Map- 614nm: SERS

0.3

0.6

0.9

1.2

1.5

Observation of SERS

Absorption (arb. unit)

74
No- SERS: entire film
SERS

Str-A

Effect of NPs
Str-C

Goswami, Sreetosh, et al. Nature materials 16.12 (2017): 1216.

Str-B

Raman Map- 488nm: No SERS

12

75

Goswami, Sreetosh, et al. Nature materials 16.12 (2017): 1216

Switching energy~ I x V x t = 10nAX0.12X30ns= 36 aJ

Dynamics and Endurance

Current Evolution in Patterned Electrodes

15

ms
104

<30ns
>1012
0.15V

~ns
>1010
<0.6V
<0.2V
<1pJ

W/E time
Write Cycles
Write Voltage
Read Voltage
Write energy

Not reported

450aJ (area 50 nm2)
The devices work without degradation between -40C to 80C

Assuming 30ns, 1PA

.1V

<.05V

1.5V

200 fA at 400nm2

1PA

>10nA

Read Current

Achieved Values

ITRS Projection

Parameter

ITRS Road-map 2015
Next best Organic
DeviceGoswami, Sreetosh, et al. Nature materials 16.12 (2017): 1216.

…and it beats all metrics

Robustness

14

16

76

Goswami, Sreetosh, et al. Nature materials 16.12 (2017): 1216.

17

Neuron- Engineering Challenges

Our J(V)s

The synapse, the most important component is one starting point

Role of chaos in signal processing

The signal along a dendrite is dynamically processed (not a simple wire)

The axon is a loss less transmission line

104 inputs to a neuron- On a circuit we get a maximum of 6 interconnects!

No three terminal device

Asynchronous- no timing

Spikes instead of digital pulses- are spikes packets- does the shape matter?

Neurons are amazing- What are the challenges?

77

Neuronal Interconnects

Our Strategy

Capacitive Memory

Resistive Memory

23

An Artificial Axon: Use of
Negative Differential Resistance

Kumar, Suhas, John Paul Strachan, and R. Stanley Williams. Nature 548.7667 (2017): 318.

Modified Hodgkin-Huxley Model

Hodgkin-Huxley Model

Negative Differential Resistance

X ~20

Enhanced PL on N-type substrates

Wave length (nm)PL on P-type substrates

Surface Charge Sensitivity of PL

A Ternary memory

22

27

c

d

-0.1

V (V)

0.0

Pt/BTO/NSTO

-4

-0.1

V (V)

0.0

0
V (V)
ON

0.1

OFF

0.1

OFF

MID

ON

-2

e

+ + + -

ࢥ1ON
P

E

4

ON

2

b

+ + + -

ࢥ2ON

102

103

104

- +
- +
- +

ࢥ1OFF
P

E

MID

w
- +
- +
- +

ࢥ2OFF

200

- +
- +

ࢥ1MID
P

E

ON

OFF

MID

100
150
Time (S)

-3V

4.5V

OFF

50

3V

..

- +
- +

w'

ࢥ2MID

VO

NSTO

26

28

Second loop in BTO FTJs, with emergent mid state between Ron and Roff. Different G-V characteristics in BTO
and STO devices. Intuitive model of interplay of Ferroelectricity and oxygen vacancies to achieve Rmid.

1

2

3 Pt/STO/NSTO

1

2

3

4

102

103

10

Pt/BTO/NSTO

Pt

4

BTO

105

R (:)
NSTO

a

Pt

R (:)

Dual Loops: Ferroelectricity and Oxygen Vacancies

BTO

BTO thickness and Device size

NSTO

25

Different Structured FTJs

Pt

Device Structure

G(V)/G(0)G(V)/G(0)

BTO

78

79

Adhesion, Enhancement and Inhibition
Factors

Surface Roughness,Wetting Angle, Charge

1.00

9.00
1.04
99.00

NSCs
FBs
KCs

1.04

1.17

ɴ

Parameter
Cell Type

0.28

0.04

0.05

J

Cell-surface Specific Adhesion/GrowthParameters

Primary Human
Keratinocytes

Primary Human
Fibroblasts

Human NeuronalStem Cells

80%

20%

0%

0%

60%

40%

80%

20%

Compound content in the film

40%

60%
100%

0%
Zirconia

YttriaTi-YSZTi

Day 1

Implant – bone interface

0

1

2

3

4

0

1

2

3

OPN

Ti

Ti

y
Da

1

*

Ti
Ti-YSZ

y
Da

4

*

y
Da

Z
YS
Ti-

Z
YS
Ti-

0

1

2

3

4

5

0

1

2

Ti

Ti

COL1A1

OCN

Implant

Rat glioma C6 cells cultured on our semiconductor
sensors for 2 days

6 MEA chips has been produced:
3 for circuits verification & testing
3 for cell adhesion verification

Z
YS
Ti-

Z
YS
Ti-

*

Square grid on right photo is the array ofrecording/stimulating electrodes

Human astrocytoma tumor cells cultured for 4
days. Neural cells shows good viability and forms
small networks.

7

Osteoblasts proliferation

Osteoblasts gene expression

0

20000

40000

60000

RUNX2

Cell density on substrate (/cm2)

Development & production of the own MEA chip for neural cells

Bone

Implant – skin interface

Fold difference

Skin

Fold difference

YSZ for Percutaneous Implant

Fold difference
Fold difference80

Normalized cell count81

By patterning neurons to grow only in particular points on a substrate
we gain control over
1. Reproducibilty of networks
2. Standardization of chip production workflow
3. Ability to regenerate chips with fresh neurons
4. Preserve ”learning” outcomes of training processes

Open Access Analytical Services for Nanotechnology,
with emphasis on Surface Analysis
1

P. J. Cumpson

1

University of New South Wales,
Mark Wainwright Analytical Centre, UNSW, Sydney, NSW, 2052, Australia

Abstract
The development of any new technology involves a “Make – Measure – Modify” cycle. In nanomaterials
DSSOLFDWLRQVWKHPRVWGL൶FXOWDQGFDSLWDOLQWHQVLYHVWHSLVRIWHQWKHPHDVXUHPHQWDQGFKDUDFWHULVDWLRQVWHS
1DQRGHYLFHV QHYHU ZRUN¿UVWWLPHLQRWKHUZRUGVWKH\IDLOWKHLU¿UVWIXQFWLRQDOWHVWV8QOLNHPDFURVFRSLFPDFKLQHVUHZRUNLVW\SLFDOO\LPSRVVLEOH$FFHVVWRQDQRDQDO\WLFDOWRROVWR¿QGRXWZK\WKHIXQFWLRQDO
test failed is absolutely essential to avoiding “dead-end” research leads.
We will discuss how nano-analytical tools can diagnose faults in materials and devices. We discuss the roleand economics of “open access” facilities and the management/funding models that have been used in sevHUDOFRXQWULHVRYHUWKHODVW\HDUV:HZLOOWKHQORRNVSHFL¿FDOO\DWVXUIDFHDQDO\WLFDOIDFLOLWLHV ;UD\SKRtoelectron spectroscopy, XPS and Secondary Ion Mass Spectrometry, SIMS) as examples of cutting-edge
spatio-spectral analytical methods.
Analytical tools, on their own, are useless. They need skilled operation and interpretation of the results. We
shall see that domain knowledge (for example from the fabrication of a device) *and* analytical knowledge(from scientists and engineers specialising in analytical methods) are both necessary for problem-solving at
this level, and must be combined. Integration of these two strands of problem-solving is a sociological, notjust an engineering problem. We look at some examples of this collaboration (both successful and unsuccessful) in the UK and Australia.

82

Prof. Peter J. Cumpson
Executive Director,
Mark Wainwright Analytical Center (MWAC),
University of New South Wales
Professor Peter Cumpson is currently Executive Director of the Mark Wainwright Analytical Centre at the
8QLYHUVLW\RI1HZ6RXWK:DOHVLQ6\GQH\$XVWUDOLD7KLVFHQWUHKDVDVWD൵RISHRSOHDQGSURYLGHV
access to cutting-edge analytical facilities to a wide range of researchers in physics, chemistry, biology
and medicine. He previously ran the open-access National EPSRC XPS Users Service (NEXUS) in theUK, after working on the metrology and standardisation of surface analytical methods (e.g. XPS) at the
UK National Physical Laboratory (NPL). He holds BA and PhD degrees in physics from the University ofCambridge, UK, and was recently awarded the Riviere prize by the UK Surface Analysis Forum for sigQL¿FDQWORQJWHUPFRQWULEXWLRQVWRVXUIDFHDQDO\WLFDOVFLHQFH

83

84

 Conclusions

 Cluster Sputter Depth Profiling Helium Ion Microscopy
 Principal Component Analysis for rapid analysis of large datasets– Technological: Tools for problems we can solve now that we could not
10 years ago

 Customer incredulity
 “We have our own methods”
 “You are too expensive”– Organisational and Sociological: Market failures Overcoming barriers to effective use;

– Comparison with the semiconductor industry– Some shared-access facilities

 Why do we need analytical techniques?

AgendaMark Wainwright Analytical Centre
University of New South Wales
Sydney, Australia
Feb 2019

And

National ESCA and XPS Users’ Service (NEXUS)
School of Engineering
Newcastle University, UK

3Peter Cumpson, Billy Murdoch, Sabrina Tardio, Anders Barlow, Ian W
Fletcher, Jose Portoles, Naoko Sano, Mariela Bravo-Sanchez, Ritchie Burnett,
Lisa Li, Andy Kiang

Open Access Analytical Services for Nanotechnology, withemphasis on Surface Analysis

Make

Functional test

good

Sell

Product development in traditional“smokestack” manufacturing industry

 Conclusions

 Cluster Sputter Depth Profiling Helium Ion Microscopy
 Principal Component Analysis for rapid analysis of large datasets– Technological: Tools for problems we can solve now that we could not
10 years ago

 Customer incredulity
 “We have our own methods”
 “You are too expensive”– Organisational and Sociological: Market failures Overcoming barriers to effective use;

– Comparison with the semiconductor industry– Some shared-access facilities

 Why do we need analytical techniques?

Agenda4

2

85

Rework

Not good

Functional test

good
Sell

Make

Functional test

Product development in 1980s
semiconductor industry

Make

Product development in traditional“smokestack” manufacturing industry

7

5

Make

Functional test

good

Sell

Product development in 1980s
semiconductor industry

Make

Product development in 1980s
semiconductor industry

8

6

86

?

Not good

Functional test

good
Sell

Make

No “rework” is possible.
Wafers are binned.

?

Not good

Functional test

good
Sell

Product development in 1980s
semiconductor industry

Make

Product development in 1980s
semiconductor industry

11

9

?

good
Sell

Process Revision

Make

Analytical tools- SEM, TEM,
EDX, XPS, SIMS?

Not good

Functional test

good

Sell

10

12

Cause of functional failure not immediately
obvious;- Chemical effects, surface segregation, thincontamination layers, etching, oxidation &adsorption effects – all in too thin a region,or on such a small scale as to be a bit of amystery

Not good

Functional test

Product development in 1980s
semiconductor industry

Make

Product development in 1980s
semiconductor industry

87

Analytical tools

?

good

– Organisational and Sociological: Market failures Overcoming barriers to effective use;

– Comparison with the semiconductor industry– Some shared-access facilities Conclusions

 Argon Cluster Sputter Depth Profiling Helium Ion Microscopy
 Principal Component Analysis for rapid analysis of large datasets– Technological: Tools for problems we can solve now that we could not
10 years ago

 Customer incredulity
 “We have our own methods”
 “You are too expensive”

Sell

Cause of functional failure not immediately
obvious;- Chemical effects, surface segregation, thincontamination layers, etching, oxidation &adsorption effects – all in too thin a region,or on such a small scale as to be a bit of amystery

Not good

Functional test Why do we need analytical techniques?

AgendaRefine process

Make

Product development in pharma & personal careproducts – closer to semicon than smokestack!

15

13

 Biomedical Imaging Facility
 Bioanalytical Mass Spectrometry Facility
 Biological Imaging Laboratory
 Electron Microscope Unit
 NMR - Nuclear Magnetic Resonance Facility
 Spectroscopy Laboratory
 Solid State & Elemental Analysis Unit
 Statistics – “Stats Central”
 Biorepository

We manage major instrumentation used by researchers for the study of thestructure and composition of biological, chemical and physical materials. Our
facilities are housed in custom-built laboratories.

Mark Wainwright Centre (Aus)

Nanotechnology is particularly
dependent on analytical techniques,because (like semicon and unlike manyindustries) rework is impossible.

Moral

16

14

88

 Conclusions

 Argon Cluster Sputter Depth Profiling Helium Ion Microscopy
 Principal Component Analysis for rapid analysis of large datasets

Response to this incredulity problem: Not easy.
(a) Hard work popularising analytical methods (seminars, lectures,
undergraduate education) by members of the analytical community(b) Better communication with the customer of the real uncertainties (andcertainties!) of the different analytical techniques.

Customer: I’ve ‘phoned the factory and they don’t use tin oxide anywhere.
XPS must be mistaken. Goodbye.

 Customer incredulity
 “We have our own methods”
 “You are too expensive”– Technological: Tools for problems we can solve now that we could not
10 years ago

Customer: “Why cant we wire-bond to the gold pads on our pressure
sensors?”

REAL CASE STUDY:

Customer Incredulity

Analyst (me): X-ray photoelectron spectroscopy (XPS) shows there is 5nm ofƚŝŶŽǆŝĚĞon top of the gold. Take a look at your process and see where itcomes from.

19

17

X-ray photoelectron spectroscopy
applications at UK National Centre– Organisational and Sociological: Market failures Overcoming barriers to effective use;

– Comparison with the semiconductor industry– Some shared-access facilities

 Why do we need analytical techniques?

AgendaPhysics, Chemistry, Materials,
Medicine, Dentistry, Biomaterials
Geology, Archaeology, Art
Conservation, and more….

In 2018 alone:
Over 300 projects>2500 samples

Since 2011:~800 projects~150 research groups
More than 40 Universities

National EPSRC XPS Users’ Service (NEXUS)
An EPSRC “Mid Range” facility dedicated to XPS
Supporting UK academia

NEXUS (UK) - surfaces

20

18

89

Modern XPS instrument
has space for many
samples on 3 plattens in
vacuumThe analytical analogy is
Multi Project Analysis (MPA): Combine samples from many users into one
cartridge/platten/cassette (depending on the type of instrument) and analyse thosesequentially on highly-automated analytical instruments. Make (automated) reports
available online.

Semiconductor Cost-Sharing:Multi Project Wafer (MPW) emerged in the 1970’s to help companies andresearchers prototype their integrated circuit designs.
Multi project wafer (MPW) services combine onto silicon wafers several different
prototype integrated circuit designs from various teams, sharing production costs.

Response – again, we learn from semicon“You are too expensive”:

 A very typical situation is this.
– Company develops an advanced coating.
– A “brown stain” occurs. Origin unknown.
– Company spends weeks trying to locate origin of stain.
They scrape off tiny amount for an analysis using ananalytical method that is cheap or that they trust throughfamiliarity.
– Time and money wasted.
– Eventually they come to XPS or SIMS, and origin of stain is
identified and rectified in a couple of hours.

“We have our own methods”

2321

 Conclusions

 Cluster Sputter Depth Profiling Helium Ion Microscopy
 Principal Component Analysis for rapid analysis of large datasets– Technological: Tools for problems we can solve now that we could
not 10 years ago

 Customer incredulity
 “We have our own methods”
 “You are too expensive”– Organisational and Sociological: Market failures Overcoming barriers to effective use;

– Comparison with the semiconductor industry– Some shared-access facilities

 Why do we need analytical techniques?

AgendaPartially addressed by: Streamlined
application process: provide a web interface

24

22

90

Secondary Ion Mass Spectrometry(SIMS)

28~1Pm

SEM / EDX
IR / Raman

SSIMS
XPS

Sampling depths

1-10 nm

~1nm
~10nm

X-ray Photoelectron Spectroscopy
(XPS)

91

40keV Water Cluster Source Conclusions

 Cluster Sputter Depth Profiling Helium Ion Microscopy
 Principal Component Analysis for rapid analysis of large datasets– Technological: Tools for problems we can solve now that we could not
10 years ago

 Customer incredulity
 “We have our own methods”
 “You are too expensive”– Organisational and Sociological: Market failures Overcoming barriers to effective use;

– Comparison with the semiconductor industry– Some shared-access facilities

 Why do we need analytical techniques?

Agenda31

29

20kV H2O
ĂƚĂŐĂƚŚĞƌĞĚĂŶĚƉƌŽĐĞƐƐĞĚďǇ^ĂĚŝĂ^ŚĞƌĂǌ ŶĠĞZĂďďĂŶŝ

40kV H2O[M+H]+

40kV Wet CO2Ar[M-Na]-

40kV Dry CO2Ar

C81H148O17P2Na2Water Cluster Results– A typical complex organic: Cardiolipin Salt

Molecular dynamics of cluster impacts

32

30

92

 Conclusions

 Argon Cluster Sputter Depth Profiling Helium Ion Microscopy
 Principal Component Analysis for rapid analysis of large datasets– Technological: Tools for problems we can solve now that we could not
10 years ago

 Customer incredulity
 “We have our own methods”
 “You are too expensive”– Organisational and Sociological: Market failures Overcoming barriers to effective use;

– Comparison with the semiconductor industry– Some shared-access facilities

 Why do we need analytical techniques?

Agenda33“Trimer” formation at the tip : three individual atoms

Helium Ion
Microscope

93

Helium Ions

Compare with electron beam interaction– Typically helium ions need no gold-coating of the sample

Samplesurface

100nm

CoNi metal particles
exsolved from metaloxide in reducing
atmosphere

Nature Communications 8(2017) 1855

Catalyst particles in HIM

Electrons

Compare with electron beam interaction– Typically helium ions need no gold-coating of the sample

40

94

Example : Tardigrades

Example : Cotton Fibres

43

41

44

42

95

Highest Spatial Resolution SIMS – by afactor of 547

45

Highest Spatial Resolution SIMS – by afactor of 5

… of course thesecondary ions fromsuch a process canbe used for SIMS:

Example: Millingwith Helium, Neonor gallium ions (Heshown here)
10nm lines, 80nm
spacing48

96
Helium Ion
Microscope

SIMS / Helium
Ion

49

Wirtz et al, LIST.

Helium Ion
Microscope

Helium Ion
Microscope

SIMS / Helium
Ion

97

0

1

2
3
x / mm

4
-0.2

-0.15

-0.1

-0.05

0

0.05

0

500

1000
1500
mass / amu

PCA component #2

2000

Rat brain data – Courtesy of John Fletcher @ Swedish National IMS Centre, Gothenburg

4.5

4

3.5

3

2.5

2

1.5

1

0.5

0

PCA of a complex image

 Conclusions

 Argon Cluster Sputter Depth Profiling Helium Ion Microscopy
 Principal Component Analysis for rapid analysis of large datasets– Technological: Tools for problems we can solve now that we could not
10 years ago

 Customer incredulity
 “We have our own methods”
 “You are too expensive”– Organisational and Sociological: Market failures Overcoming barriers to effective use;

– Comparison with the semiconductor industry– Some shared-access facilities

 Why do we need analytical techniques?

y / mm

2500

53

3

0

4
4.5

2.5

0

1

2
3
x / mm

4

1

2
3
x / mm

4
-0.2

-0.15

-0.1

-0.05

0

0.05

0.1

0

0

500

-0.2

-0.15

-0.1

-0.05

0

0.05

2000

1000
1500
mass / amu

1000
1500
mass / amu

500

PCA component #13

PCA component #2

2500

2000

Rat brain data – Courtesy of John Fletcher @ Swedish National IMS Centre, Gothenburg

4.5

4

3.5

3
3.5

2

2.5

2

0.2
0.15

1
1.5

1.5

1

0.5

0

0.5

0

PCA of a complex image

Rat brain data – Courtesy of John Fletcher @ Swedish National IMS Centre, Gothenburg

Total ion image

PCA of a complex imagey / mmAgenday / mm

2500

4

1

2
3
x / mm2
x / mm3

2
3
x / mm

4

4

-0.1

-0.1

-0.25
0

-0.2

-0.05 -0.15

0

4 0.05

0
-0.05

0.1

-0.2

1

0.1
0.05

0.15

0.2

-0.15

1

3

4.5

0

0.25

4

0

4

4.5

2.5

0

3.5

2

3.5

3

4.5

3.5

3

2.5

2

1.5

1

0.5

0

2.5

2

0.15

1.5

1

0.5

0.2

1

1.5

0.5

0

0

500

PCA component #13

0

1000
1500
mass / amu

2000

2000

1000
1500
mass / amu

1000
1500
mass / amu

500

2500

2000

2500

PCA component #2

PCA component #31

500

-0.2

-0.15

-0.1

-0.05

0

0.05

Full mass resolution, entire mass range

PC2

Rat brain data – Courtesy of John Fletcher @ Swedish National IMS Centre, Gothenburg

y / mm0y / mmPCA of a complex imagey / mm98
2500

 Conclusions

 Cluster Sputter Depth Profiling Helium Ion Microscopy
 Principal Component Analysis for rapid analysis of large datasets– Technological: Tools for problems we can solve now that we could not
10 years ago

 Customer incredulity
 “We have our own methods”
 “You are too expensive”– Organisational and Sociological: Market failures Overcoming barriers to effective use;

– Comparison with the semiconductor industry– Some shared-access facilities

 Why do we need analytical techniques?

Agenda 256x256um, 128x128
pixels, 120 levels
 70,000 mass spectrum
at each voxel
 Just under 2 million
voxels Dataset just over 1Tb
uncompressed, 30Gb
PJ Cumpson, IW Fletcher, N Sano, AJ Barlow
Surface and Interface Analysis 48 (12), 1328compressed.
1336

20kV, C60 imaging depth profile from a
Yucca plant leaf

61

99

 No “rework” means analytical failure analysis isessential in nanomanufacturing.
 Market failures in solving these failures – theseare being overcome, but can mean newtechniques are not taken-up as rapidly as theyshould be New analytical technologies. For example in
Surface Analysis, high resolution 3D analysis ofsoft materials and complex organics for the firsttime.

Conclusions

62




NEXUS is an EPSRC Mid-Range Facility
EPSRC “Great Eight” & NU funding 2013EPSRC Newcastle/Durham Knowledge
Transfer Account Thank you for yourattention!

Acknowledgements

63

Emerging understanding of anthropogenic and natural
nanoparticle impacts on Earth systems- a new paradigm for earth science 1, 2, 3

M. Murayama, 2, 3 M.F. Hochella, Jr., 3 T.R. Pruitt

1

Professor, Department of Materials Science and Engineering, Virginia Tech, Blacksburg, VA 24061, USA
(QHUJ\DQG(QYLURQPHQWDO'LUHFWRUDWH3DFL¿F1RUWKZHVW1DWLRQDO/DERUDWRU\5LFKODQG:$86$
3
NanoEarth*, Blacksburg, VA 24061, USA

2

Abstract
This presentation will introduce the NSF-Virginia Tech National Center for Earth and Environmental
Nanotechnology Infrastructure (NanoEarth) and its long-term academic goals.
I. INTRODUCTION
NanoEarth is supported by the U.S. National
Science Foundation (ECCS 1542100). The
center, funded as a member of the National
Nanotechnology Coordinated Infrastructure(NNCI) network in September 2015, is designed
to provide a network node that supports external
researchers who work with nanoscience- andnanotechnology-related aspects of the Earthand environmental sciences/engineering at
local, regional, and global scales, including
the land, atmospheric, water, and biologicalcomponents of these fields. This includes
enhancing our ability to apply nanotechnology
to solve challenges in the Earth sciences andFigure 1. The global budget for naturally occurring inorfar-reaching and critical environmental issues,
ganic nanoparticles. (1 Tg = 1012 g = 106 metric tons.)
including climate change science and engineering.
NanoEarth is a new concept within the former
National Nanotechnology Infrastructure Network (NNIN) and current NNCI Network as a dedicated site
in areas related to “Earth and environmental sciences/engineering” that have heretofore been only minor
players in this particular NSF-driven nanoscience and technology infrastructure model.
II. LONG-TERM ACADEMIC GOALSOne of our academic goals is to understand the interaction between natural, incidental, and manmade
nanomaterials and their impact on Earth systems. Despite nanomaterials’ ubiquity, only in the last 20
years or so have their impacts on Earth systems been studied intensively, this mostly due to a much better
understanding of the unique behavior of materials at the nanoscale, and multiple advances in analytic
techniques. It is clear that NPs are embedded and intertwined with all atmospheric, hydrospheric, andsolid Earth processes, that NPs are relevant from molecular to planetary dimensions, and that they operatefrom the shortest to the longest Earth time-scales (Fig. 1). This also leads some fundamental questions to
WKHFODVVLFDOHDUWKVFLHQFHVIRUH[DPSOHDGKHUHQFHWRWKHFODVVLFGH¿QLWLRQRIDPLQHUDOKDVXQGRXEWHGO\left large numbers of natural non-crystalline (amorphous) and poorly crystalline materials on the
periphery, or worse, understudied and even unnoticed. Environmental mineralogy and nanomineralogy
recognize that such materials are of exceptional importance in near-surface aqueous, soil, and atmosphericenvironments. These are some of the most important factors in environmental science as a whole.
Reference[1] M.F. Hochella et al, “Natural, Incidental, and Engineered Nanomaterial Impact on the Earth System” Science, in press.

100Mitsuhiro Murayama
Department of Materials Science and Engineering, Virginia Teche-mail: murayama@vt.edu
Education
Ph.D. 1996
M.S.
1993
B.S.
1991
Appointments
2019.2 
2017.6 2015-2019
2011-2017
2008-20112006-2008
2000-2006
1996-2000

Tohoku University (Japan), Nuclear Science and Engineering
Tohoku University (Japan), Nuclear Science and Engineering
Tohoku University (Japan), Materials Science and Engineering
Director, The NSF - Virginia Tech National Center for Earth andEnvironmental Nanotechnology Infrastructure (NanoEarth)&KLHI6FLHQWLVW(QHUJ\DQG(QYLURQPHQWDO'LUHFWRUDWH3DFL¿F1RUWKZHVWNational Laboratory, US Department of Energy
Professor, Materials Science & Engineering, Virginia Tech
Deputy Director, The NSF - Virginia Tech National Center for Earth andEnvironmental Nanotechnology Infrastructure (NanoEarth)
Associate Professor, Materials Science & Engineering, Virginia Tech
Research Associate Professor, ICTAS, Virginia Tech
Senior Scientist, Materials Science & Engineering, University of Virginia
Senior Researcher, National Institute for Materials Science (NIMS), Japan
Researcher, National Research Institute for Metals (NRIM), Japan

Michael F. Hochella, Jr.
(QHUJ\DQG(QYLURQPHQWDO'LUHFWRUDWH3DFL¿F1RUWKZHVW1DWLRQDO/DERUDWRU\
e-mail: hochella@vt.edu
Education
Ph.D. 1981
Stanford University, Earth Sciences
M.S.
1977
Virginia Tech, Geological Sciences
B.S.
1975
Virginia Tech, Geological Sciences
Appointments
2019.2 University Distinguished Professor Emeritus, Virginia Tech
2019.2
Director of User Development, The NSF - Virginia Tech National Center
for Earth and Environmental Nanotechnology Infrastructure (NanoEarth)2015 - 2019.1
Director, The NSF - Virginia Tech National Center for Earth andEnvironmental Nanotechnology Infrastructure (NanoEarth)2015 Laboratory Fellow, Energy and Environmental Directorate,
3DFL¿F1RUWKZHVW1DWLRQDO/DERUDWRU\86'HSDUWPHQWRI(QHUJ\2007 - 2019.1
University Distinguished Professor, Virginia Tech
1996 - 2007
Professor, Geosciences, Virginia Tech
1992 - 1996
Associate Professor, Geosciences, Virginia Tech
1989 - 1992
Research Associate Professor, Earth Sciences, Stanford University
1981 - 1983
Senior Scientist, Corning, Inc.

Tonya R. Pruitt
NanoEarth, Virginia Teche-mail: trpruitt@vt.edu
Education
B.S.
2008
Appointments
2016 2009 - 20162008 - 2009

Virginia Tech, Dual Degrees in Biochemistry and Agricultural andExtension Education
Assistant Director, The NSF - Virginia Tech National Center for Earth andEnvironmental Nanotechnology Infrastructure (NanoEarth)Administrative Specialist for Laboratory for Interdisciplinary Statistical
Analysis, Department of Statistics, Virginia Tech
Graduate Researcher for the Department of Biochemistry, Virginia Tech

101

102

1km

Capacity 66,000

(DUWKDQG(QHUJ\'LUHFWRUDWH Pacific Northwest National Laboratory,
Richland, WA, USA

 The NSF - Virginia Tech National Center
for Earth and Environmental Nanotechnology Infrastructure
Virginia Tech, Blacksburg, VA, USA

M. Murayama, M.F. Hochella, Jr., T.R. Pruitt– a new paradigm for earth sciencee-Emerging
ing
g understanding off ananthropogenic
nthropogenic andnaturalal nanoparticle
anooparticle impact on Earthrthh systems

NSF (ECCS 1542100)

15nm

As on Al2O3

4


precipitated from a geothermal brine (ab/ad-sorption, desorption)

Transport and reactivity

Shape, morphology, aggregation
Phase transformations (crystallization, growth, ..)Structural-Chemical instability/variation
Inhomogeneous, non-equilibrium

What were happening when a mineral became a nanoscale substance?

A mineral is a naturally occurring substance, representable bya chemical formula, that is usually solid and inorganic,and has a crystal structure.

Nano in Earth and Environmental Sciences

Founded in 1872, over 30,500 students (82.7% undergraduate and17.3% graduate) and 1,443 full-time instructional faculty members.

103

Understand the interaction between natural, incidental andmanmade nanomaterials and their impact on Earth systems.

NanoEarth is designed to provide a network node that supports
external researchers, and is the only NNCI site dedicated to thenanoscience and technology of Earth and its environment.

All natural, incidental and engineered (manmade)nanoparticles are circulating among the hydrosphere /aerosphere/
geosphere
once
they
are
generated/released.

Nanoparticles are the chief transporter of all kind ofpure elements, organic complex, inorganic compounds,
etc.

NanoEarthth: Mission and Long
gg-Term
Academic Goals

NanoEarth supports researchers across academia, government, andindustry to enable critical discoveries at the nanoscale. We provide theadvanced tools and expertise to guide nanotechnology research andpropel environmental solutions.

NanoEarth is the leading destination for earth and environmental
nanoscience discovery. We serve the scientists and engineers solving
our greatest environmental challenges.

NanoEarth is designed to provide a network node that supports
external researchers, and is the only NNCI site dedicated to thenanoscience and technology of Earth and its environment.

The National Center for Earth and Environmental Nanotechnology
Infrastructure (NanoEarth) is a node of the National Nanotechnology
Coordinated Infrastructure (NNCI), an NSF-funded network of 16
centers spread throughout the United States serving as user facilities
for cutting edge nanotechnology research.

NanoEarthth: Destination for Discovery

104
Industrial & Entrepreneurship
Programs

Diversity Programs

Statistics: 234,000 square feet, 150+ instruments, roughly 220 staff
Keys:
 Mass spectroscopy
 Spectroscopy & Diffraction
 Microscopy
 Subsurface flow & transport Molecular Science Computing
 Cell isolation & systems analysis
 NMR and EPR

Environmental Molecular Scientific Laboratory:
A national scientific user facility operated by Battelle for DOE BER.

Partner Facilities: PNNL
LL-EMSL

Faculty co-PIs

Instrument Specialist

Core Management Team

PeopleElectron, X-ray, Ion, Photon beam instruments and more:o
3 TEMs, 2 SEMs, FIB, SIMS, XPS, Raman/AFM,
3 AFMs, UV-Vis-NIR, BET, DLS, Ultra Filtration
Nano-synthesis, sample prep.
Bio culturing and reactor facilities
Experimental chambers (aerosol, aqueous, soil, etc.)
Field expertise, nano methods and tools University of Montana*
Small Company (18)
2 Year College (2) ADA Technologies
 Kingsborough Community College  University of New Mexico* University of South Carolina* Black & Veatch*of the City College of New York* University of Texas at El Paso*
 Clark Coins Inc
 Virginia Western Community University of Virginia
 CSI: Create. Solve. Innovate. LLC*
College Wake Forest University
 Great Lakes Minerals, LLC*
4 Year College (3) West Chester University*
 Mako Technologies, LLC
 Longwood University*
Foreign (5) Micronic Technologies*
 Roanoke College* Laurentian University*
 Monofrax LLC* Washington and Lee University*
 Peking University* NanoSafe, Inc.*
State and Federal Government (5) NASA Jet Propulsion Laboratory*  Tokyo University of Agriculture and  Nanosonic Inc
Technology*
 Natural Immunogenics*
 Pacific Northwest National University of Cambridge*
 Nuvotronics, Inc.
Laboratory*
 University of Polymer Solutions
 DOE Thomas Jefferson National
Nottingham/Promethean Particles*  SEMTech
Accelerator Facility (Jefferson Lab)
 Simon, Greenstone, Panatier, United States Geological Survey* Pre-College (1) Roanoke Public Schools*
Bartlett Law Firm*
 Virginia Department ofLarge Company (14)
 Sorptive Minerals Institute*Environmental Quality*
 Chevron Phillips
 Techulon Inc*
Other University (18)
 Danaher Motion
 Wimbish Gentile McCray & Roeber Binghamton University*
 Federal Mogul
PLLC College of William & Mary
 Harris
 Colorado School of Mines* Headwater Duke University*
 Jeld-Wen Georgia State University*
 Jewel Polymer Consulting
 Howard University* Kollmorgen Kansas State University
 Luna Innovations
 Penn State Behrend* Radford University* Moog Components Group Rutgers University*
 Novozymes*
 University of Alabama*
 Pavco University of Delaware* VPT Inc.
 University of Kentucky* Wolverine*25 higher ed institutions, 12 companies, & 4 government agencies engaged with NanoEarth

External User Institutional Affiliations

21, 300 sq. ft. (up to 38,000 sq. ft.) of laboratory, instrument, & office space

䖚
䖚
䖚
䖚

䖚

Facilities: Virginia Tech

105

3 Blacksburg
small businesses

College/University ResearchCollege/University E&O Visit
State & Federal Government
Small/Large Companies

Foreign: Laurentian University
 Peking University
 Tokyo University of Agriculture and Technology
 University of Cambridge
 University of Nottingham & Promethean Particles

College/University ResearchCollege/University E&O Visit
State & Federal Government
Small/Large Companies

Foreign: Laurentian University
 Peking University
 Tokyo University of Agriculture and Technology
 University of Cambridge
 University of Nottingham & Promethean Particles*since Octo
October 2015

External User Locations

3 Blacksburg
small businesses*since October 2015

External User Locations㻭㼘㼘 㼁㼟㼑㼞㼟㻤㻜㻑

User Affiliations

Local Site Academic

ForeignState and Federal Gov

Large Company

Small Company

Pre-College

2 Year College

4 Year College

Other University

㻟㻑

㻟㻑

㻣㻑
㻜㻑

㻟㻢㻑

㻱㼤㼠㼑㼞㼚㼍㼘 㼁㼟㼑㼞㼟

㻟㻢㻑

㻤㻑

㻣㻑

106

㻟㻣㻑

㻟㻑

㻝㻑

㻝㻟㻑

㻢㻑

㻡㻑

㻝㻠㻑

㻞㻑

Every week: heard over 265 radio stations by
1.1M listeners; average of 300k podcast listens

30 NanoEarth Sponsored Shows

㻜㻑

㻥㻑

㻞㻑

㻤㻑

User Disciplines㻼㼞㼛㼏㼑㼟㼟

㻼㼔㼥㼟㼕㼏㼟

㻻㼠㼔㼑㼞㻌㻾㼑㼟㼑㼍㼞㼏㼔㻻㼜㼠㼕㼏㼟

㻹㻱㻹㻿㻛㻹㼑㼏㼔㼍㼚㼕㼏㼍㼘㻌㻱㼚㼓

Students from the City University of New
York learn about SIMS operation and use
in Earth & environmental research.

All natural, incidental and engineered (manmade)nanoparticles are circulating among the hydrosphere /aerosphere / geosphere once they are generated/released.

Nanoparticles are the chief transporter of all kind of pureelements, organic complex, inorganic compounds, etc.

Long-Term Academic Goals

 Serious collaboration with the VT
Nanoscience program Hosting REU students from Saudi Arabia(and Macedonia)

 Presenting about NanoEarth at numerous
conferences㻹㼑㼐㼕㼏㼕㼚㼑

㻹㼍㼠㼑㼞㼕㼍㼘㼟 Starting an environmental nanoscience seminar series and abrown bag discussion series Hosting tour groups and potential users and collaborators

 USA Science & Engineering Festival & Virginia Tech Science
Festival

 Developing workshops for 5 visiting schools/student groups㻸㼕㼒㼑㻌㻿㼏㼕㼑㼚㼏㼑㼟㻳㼑㼛㼘㼛㼓㼥㻛㻱㼍㼞㼠㼔㻌㻿㼏㼕㼑㼚㼏㼑㼟㻱㼐㼡㼏㼍㼠㼕㼛㼚㼍㼘㻌㻸㼍㼎㻌㼁㼟㼑㻱㼘㼑㼏㼠㼞㼛㼚㼕㼏㼟㻯㼔㼑㼙㼕㼟㼠㼞㼥

Education & Outreach Overview

107

Aeolian

20+2(Volcanoes)

12

103-4

Erosional
10

Aeolian
81+14

Hydrothermal
1?

OPEN OCEANS

Coal ash is a grey, powdery byproduct ofburning cool to produce energy. It is
composed of materials remaining after coalis burned, including fine sand (silica),
unburned carbon, various metals.

 Six-month post-spill damage cost over
$295M.
 Attempts to clean the river left over 95%
of coal ash behind Long-term impact?

In 2014, 82,000 tons of coal ash spilt in Dan river (NCC / VA)

102

Glacial Sea spray
2
2
CONT.
SHELVES Shelf
throughput
102-3

Aeolian
9+2

All numbers in Tg = 10 g=100,000 tonnes
All italicized numbers are fluxes (Tg yr-1)

107-8

RiversAeolian230+6

CONTINENTS

320(Min. dust)

Aeolian

The Global Budget for Naturally Occurring Inorganic Nanoparticles

Y. Yang et al., Nature Comm. (2017)

Here we have discovered that burning coal also produces large quantities of otherwise rare Magnéli
phases (TixO2x–1 with 4  x  9) from TiO2 minerals naturally present in coal. This provides a new
tracer for tracking solid-state emissions worldwide from industrial coal-burning. In its first toxicity
testing, we have also shown that nanoscale Magnéli phases have potential toxicity pathways that are
not photoactive like TiO2 phases, but instead seem to be biologically active without photostimulation.

T xO2xTi
2xx-1
1 Nanoparticles in Coal Ash

B. Kim et al., Environ. Sci. Technol. (2010)

Particles likely came from consumer
products (Socks, Antibacterial sprays)

Silver Sulfide Nanoparticles in Final Sewage Sludge Products

108

Calcite in-situ compression( OM)

A transformative & interdisciplinary international
research collaboration (technical development).

Strain-And-Tomography-Holder (SATO-Holder)

A custom specimen holder and control
software are developed in collaboration
with URC, Kyushu University.

Nanooo-mechanicsof Timeee-dependent
Brittle Processes

Long-term: greenhouse gas impacts on climate changes
Short-term: coal-burning contributes to PM2.5

TixO2x-1 NPs provide a new tracer for
tracking solid-state emissions
worldwide from industrial coal-burning.

Characteristic Signature of Industrial Coalal-burning࿴ḷᒣ┴ⓑᓮᾏᓊ

We now argue that adherence to the classic definition of a mineral has
undoubtedly left large numbers of non-crystalline and poorly crystalline
materials on the periphery, or worse understudied and even unnoticed
especially when the minerals are in nanometer geometry.

… A mineral is a naturally occurring substance, representable by a chemical formula, thatis usually solid and inorganic, and has a crystal structure.

M.F. Hochella et al., Science (2008)

To understand the physical and mechanical properties ofrocks under shallow crustal conditions.

ᇸ⋢┴Ṋ⏥ᒣ

Deformed andd Weatheredd Calcite (in Limestones)

Session 4【Characteristics of Facilities and their Applications in Nanotechnology Platform /ナノテクノロジープラットフォームの特徴的な技術とその応用】

Session 4【Characteristics of Facilities and their
Applications in Nanotechnology Platform /ナノテクノロジープラットフォームの特徴的な技術とその応用】

“Toward further development of nanotechnology platform”「ナノテクノロジープラットフォームのさらなる発展をめざして」

Katsuaki Sato (Program Director for Nanotechnology Platform, MEXT)
佐藤 勝昭（文部科学省ナノテクノロジープラットフォーム プログラムディレクター）“Improvement of chemical fixation effect by oxygen nanobubble-Cytological analysis of Ralstonia solanacearum-”「酸素ナノバブルによる化学的固定効果の向上− Ralstonia solanacearum の細胞学的解析−」

Kanako Inoue (Osaka University)
井上 加奈子（大阪大学 微細構造解析プラットフォーム）“More chance with Nanotechnology Platform: Next Generation
MEMS R&D model”「失敗は成功の元 : ナノテクノロジープラットフォームで試して拓く先端集積 MEMS」

Yoshio Mita (The University of Tokyo)
三田 吉郎（東京大学 微細加工プラットフォーム）“Biopharmaceutical Application of Nanotechnology-Development of Transdermal Vaccine-”「バイオ医薬品へのナノテクノロジーの応用−塗るワクチン開発−」

Masahiro Goto (Kyusyu University)
後藤 雅宏（九州大学 分子・物質合成プラットフォーム）111

ナノテクノロジープラットフォームのさらなる発展をめざして
1, 2

1

佐藤

勝昭

ナノテクノロジープラットフォーム・プログラムディレクター
2
東京農工大学名誉教授
183-8538 東京都府中市晴見町 3-8-1

要旨
本講演では文部科学省のすすめるナノテクノロジープラットフォーム事業の概略について述べ、この事業が科学技術コミュニティに設備共用の文化を定着させ、多くの秀でた成果を生み出していることを概説するとともに、さらなる今後の発展にむけての問題提起をする。

I. はじめに先進的で高度な微細構造解析装置・微細加工装置は、Society5.0 をめざす IoT デバイスの開発などになくてはならない研究インフラであるが、その高度化とともに価格が高額になり、もはや通常の研究予算では購入できなくなっており、一部の国立研究機関・大学・研究室のみに偏在しその他の研究者に開放されてこなかった。また、これらの装置を維持するには高度の技術をもった専門の人材が必要であるが、大学・研究機関はこうした人材を維持することが困難になってきた。さらに、オープンイノベーション時代を迎え自前主義を捨てた大企業からも、公的資金で整備された高度のナノテク装置を利用したいという要望が強くなってきた。海外では、米国のNNCI に代表されるようなナノテクインフラ拠点ネットワークが整備され、装置を共用することで世界中の企業が集い、研究開発を進めており、わが国も、国の研究開発予算の大幅増が期待できない昨今、装置と知の共用による新しい研究開発文化を根付かせることが求められてきた。
このような状況を受けて、平成 24 年文部科学省はナノテクノロジープラットフォーム事業を発足した。本事業は、前身のナノ支援、ナノネット事業を発展的に継承する形で、ナノテクノロジーの最先端の研究設備とその活用のノウハウを有する機関が緊密に連携して、設備の共用体制の構築を共同で進める 10 年間のプロジェクトである。各拠点は質の高い支援を行っており、わが国の研究者コミュニティになくてはならない研究インフラとして定着しつつある。

II. ナノテクノロジープラットフォームの現状と課題
ナノプラットは図 1 に示すように、微細構造解析、微細加工、分子物質合成の 3 つのプラットフォームからなり、それぞれ十数ヶ所の実施機関と代表機関で構成され、25 機関、38 拠点が参画している。NIMS がセンター機関を担っており、センター機関を担っており、総合調整・外部連携を受け持っている。登録されているすべての装置とその仕様は、ホームページで検索することができる。
本事業では、産学官の多様な利用者による設備の共同利用を促進し、産業界や研究現場が有する技術的課題の解決へのアプローチを提供するとともに、産学官連携や異分野融合を推進することを目標としている。
図 2 は、前身のナノネット以来の利用件数の推移である。ナノネット時代は、1,000件程度であった利用件数が、ナノプラットになってから年々増加し最近では約 3,000件に達しており、その 1/4 は企業の利用であることも特筆すべきであろう。
図 1．ナノテクノロジープラットフォーム参画機関

112

年間の予算規模（委託費）はおよそ 16 億円であるが、実際の活動規模は、各参画機関による運営費交付金からの充当約 18 億円や、ユーザーからの利用料約 8 億円、その他収入約 4 億円を含めると、この倍以上の 46 億円
規模になっていると見積もられる。このうち約 45％が装置の運転資金に、約 40％が支援に当たる技術スタッフの雇用に当てられている。
本事業から社会に貢献する多数の研究成果が出ている。毎年度末には有識者による委員会で「秀でた利用成果」5-6 件と、このうちから最優秀賞が選ばれ、ナノテク
総合シンポジウムにおいて表彰される。各年度の最優秀賞に輝いた成果を Table1 に紹介する。
図 2．利用件数の推移
技術スタッフの「匠の技」を正当に評価し、キャリア開発を支援するのも本事業の重要なミッションである。平成 29 年度技術スタッフ表彰において優秀技術賞を受けたのは、東京大学微細構造解析 PF の熊本 明仁さん、テーマは「原子分解能 STEM-EDS マッピングによる原子カラムの可視化」であった。技術支援貢献賞には、山口大学微細加工 PF の岸村 由紀子さんの「電子線リソグラフィを用いたパターン形成技術支援」と、
北九州産業学術推進機構微細加工 PF の安藤 秀幸，
竹内 修三さんの「CMOS
集積回路 -MEMS 試作支援」が選ばれた。
Table1 最優秀利用成果
年度

利用成果

ユーザー

実施機関

平成 28

トレンチ MOS 構造を設けた Ga2O3
ショットキーバリアダイオード

ノベルクリスタルテクノロジー

NIMS

平成 27

指定薬物 3,4- ジクロロメチルフェニ
デートの合成と分析

科警研

分子研

平成 26

フッ化物薄膜を用いた真空紫外光源

トクヤマ

名工大

平成 25

シリコンエレクトレットマイクロ
ホンの開発

リオン

東北大

III. 今後の課題
本事業は、平成 29 年度に中間評価を受け、事業全体については、非常に高い評価を受けた。ただし、科学技術の新たな成長（Society5.0 等に対応した新材料、再生医療等の生命科学に向けた細胞工学等）に合わせてプラットフォームを整備すること、支援の質の向上や新たな支援要請への対応において隘路となっている状
況を打開するため、機器の拡充や技術支援者数の増強を図ること、データ科学との連携を行うことなどの注文がついた。これらについては PD/PO ペーパーを出して対応を図っている。ナノプラット事業は、「共用の文化」の初めての成功例である。この事業がモデルとなって、他分野への波及が進みつつある。しかし、設備長期使用にともなう維持費の増加、陳腐化した装置の最新鋭へのリプレース、支援にあたるスタッフの任
期付き雇用の問題などが顕在化している。これらについては、国の抜本的かつ継続的な政策を要望したい。

佐藤

勝昭

CV
1966.3 京都大学大学院工学研究科修士課程修了
1966.4 日本放送協会入局（1996-1998 大阪放送局技術現業部、1998-1984 放送科学基礎研究所）
1984.4 東京農工大学（1984-1989 工学部助教授、1989-2005 同教授、2005-2007 理事・副学長、2007- 名誉教授）
2007- 科学技術振興機構（2007-2013 さきがけ「次世代デバイス」研究総括、2008- 研究広報主監
2010-2018 研究開発センターフェロー、2018- 同特任フェロー）
2017- 文部科学省参与（ナノテクノロジープラットフォーム PD）

113

114

੔ਤ৓दৈ২ऩ๶಍ଡୗੰෲಎ઼‫؞‬๶಍ਸੵಎ઼म‫ؚ‬Society5.0॑ीकघ
IoTॹংॖ५भ৫৅ऩनपऩऎथमऩैऩःଢ଼஢ॖথইছदघऋ‫ؚ‬जभৈ২৲धधुप੼તऋৈપपऩॉ‫ुؚ‬मृৢଞभଢ଼஢੒઴दमභোदऌऩऎ
ऩढथःऽघ‫؛‬ऒभेअऩಎ઼म‫ؚ‬঳৖भবয়ଢ଼஢ਃঢ়‫؞‬প৾‫؞‬ଢ଼஢஼भापု૔खजभ
౎भଢ଼஢঻प৫ଣऔोथःऽच॒दखञ‫؛‬ऒोैभಎ઼॑೐੅घॊपमৈ২भૼ୒॑ुढञ௧୅भয౫ऋ૑ਏदघ
ऋ‫ؚ‬প৾‫؞‬ଢ଼஢ਃঢ়मऒअखञয౫॑೐੅घॊऒधऋ൑୔पऩढथऌऽखञ‫؛‬ड़‫ش‬উথॖঀঋ‫ش‬३ঙথৎ৻॑ಶइঽ৐਌ଝ॑ຽथञপ੫঵ऊैु‫ਁؚ‬৓ৱসदତ૟औोञৈ২भॼঀॸॡಎ઼॑ਹ৷खञःधःअਏ஦ऋਘऎऩढ
थऌऽखञ‫؛‬

X

X

X

X

ూବ

ધ৖ఐ৾੄ॼঀॸॡঀট४‫ش‬উছॵॺইज़‫ش‬঒PDূ਎஗ੵপ৾੡༁ઇ౸
ఐ৾ૼ୒ஷ௪ਃଡଢ଼஢৫৅ਅറ७থॱ‫્ش‬ભইख़ট‫ش‬ଯઢ৤ೣॼঀॸॡঀট४‫ش‬উছॵॺইज़‫ش‬঒भऔैऩॊ৅ன॑ीकखथ

2019.2.1ਸ਼17৚ॼঀॸॡঀট४‫ش‬੕়३থএ४क़঒

ᵑ৪ব‫ؚ‬஻ব‫ؚ‬઎೓मੑ઺৓पॼঀॸॡঀট४‫ش‬বੇ਺ৱપभ10٫‫ع‬15٫॑ુ৷઱ਝॿॵॺড‫ش‬ॡ‫؞‬ುਡ஄ਛपౄਊख‫ؚ‬ౄৰखञ੔ഈଢ଼஢ॖথ
ইছभॿॵॺড‫ش‬ॡ॑ଡണखञ‫્؛‬प‫ؚ‬৪বभ
NNIN‫ق‬ਠ૔भNNCI‫ृك‬NCN‫ق‬NSF‫ؚك‬஻বभ6७থॱ‫ش‬मુ৷ॖথইছधखथୖস਑ृব੠ৌ
ૢऋऺऻ౥ਛखथःॊ‫؛‬௎ପृ઎೓ु‫ؚ‬ব‫؞‬৉ୠ౐ਜ਼दॼঀॸॡঀট४‫ش‬ଢ଼஢ॖথইছभॿॵ
ॺড‫ش‬ॡऋ஄ਛऔोथःॊ‫؛‬৪বभౄৰखञਯેभುਡॿॵॺড‫ش‬ॡपउःथम‫ુؚ‬৷७থॱ‫ش‬भশফभ৽ୡ॑ણऊख‫ؚ‬৴ഺ৆ਿऊैभৱসम৸৬ઈ੾ાभ3 સऺनदઈ੾ऋਛয়खथःॊ‫؛‬

X

X૚বभ੔ഈુ৷‫؞‬ଢ଼஢ುਡभథ஑

४‫ش‬উছॵॺইज़‫ش‬঒হ঵भ໪റपणःथ஽स‫ؚ‬ऒभহ঵ऋఐ৾ૼ୒॥঑গॽॸॕपਝ૟ુ৷भધ৲॑৒ାऔच‫ؚ‬੗ऎभೢदञਛટ॑েाলखथःॊऒध॑໪ହघॊधधु
प‫ؚ‬औैऩॊ০৏भ৅னपिऐथभਖ਻઀କ॑खऽघ‫؛‬X ম൥౰दम‫ؚ‬मगीपધ৖ఐ৾੄भघघीॊॼঀॸॡঀট

ম൥౰भ৔ઍ

ᵒ115

2007-20112012-2021ॼঀউছॵॺ

X ્৒ী৙भଢ଼஢঻पेॊ஫ଁ୩ୠऊै৾੠ੈ৊दৗ୩ୠ৫ิष

X ইট‫ش‬ඹ঱਌ଝऊै५ॺॵॡ੎ଳष

X ਁ৓ৱস౅ाऊैଃ౺੗஘৲ष‫ిق‬જऩਹ৷મୖসद৽੾੅ਢ‫ك‬X ঽীभଢ଼஢प਺ৱऊैঘ‫ش‬२‫ش‬भਖ਻ੰৠप૑ਏऩ਺ৱष

X ঽীभଳਡ‫਻ୖ؞‬ऊैঘ‫ش‬२‫ش‬भଳਡषX ট‫ش‬ढ़ঝ‫؞‬জ‫ش‬४ঙॼঝऊैॢট‫ش‬ংঝ‫؞‬ॖথॱ‫ॼش‬३ঙॼঝष

X ॔ॼটॢ‫ق‬ংছংছ‫ك‬ऊैॹ४ॱঝ‫ॺॵॿق‬ড‫ش‬ॡ஑‫ك‬षX ॡট‫ش‬६ऊैड़‫ش‬উথषX ອસॉ‫ق‬ञऒणऻ৲‫ك‬ऊै૯ᅆ‫ك়੆ق‬षX ਚથऊै३ख़॔ष‫ق‬঄ॺ‫؞‬ঔঀ‫؞‬ढ़ॿ‫ॳ؞‬ग़भ१ॖॡঝ‫ك‬ৗञऩଢ଼஢ધ৲भᅿਛ

ॼঀॿॵॺ

ॼঀ੍ର

2002-2006पঢ়घॊਈ੔ഈभଢ଼஢ਝ૟धजभણ৷भঀक़ঁक़॑થघॊਃঢ়ऋಸഡप
৴௚खथ‫؜‬৸ব৓ऩਝ૟भુ৷৬਑भଡണ॑ુ৊दਤीॊ10ফ৑भহ঵
दघ‫؛‬X ॼঀ੍ର‫ॺॵॿঀॼؚ‬হ঵॑৅ன৓पಲഅघॊ஄द‫ॸঀॼؚ‬ॡঀট४‫ش‬ইज़‫ش‬঒হ঵ऋ५ॱ‫ॺش‬खऽखञ‫؛‬X ऒभेअऩూବऊै‫ؚ‬਴ਛ24(2012)ফ২पॼঀॸॡঀট४‫؞ش‬উছॵॺુ৷पेॊৗखःଢ଼஢৫৅ધ৲॑உહऊचॊऒधऋ੷ीैोथःऽघ‫؛‬ᵕᵓX ਓ৾઻भ੗஘ऩਹ৷঻पेॊ੔ഈਝ૟भુ৊ਹ৷॑

X ॎऋবु‫ؚ‬বभଢ଼஢৫৅੒઴भপ்ੜऋ਋ୄदऌऩःઆ০‫ؚ‬ಎ઼धੴभ

ऩਹ৷঻पेॊ੔ഈਝ૟भુ৊ਹ৷॑യਤख‫ؚ‬ਓ঵ੀृଢ଼஢ਠৃऋ
થघॊૼ୒৓ୖ਻भੰৠषभ॔উট‫୹઀॑ॳش‬घॊधधुप‫ؚ‬ਓ৾઻৴௚‫ؚ‬౮ী৙੆়‫ؚ‬য౫୘ਛ॑௓ਤघॊ‫؛‬X ਝ૟‫؞‬઱ਝभુ৷॑ৢगञઐ૴ृੴચૐ৺पेढथ‫ؚ‬ਓ৾઻भ੗஘প৲ ॑ीकखऽघ‫؛‬X ॼঀॸॡ‫؞‬౫મ‫ॹ؞‬ংॖ५पঢ়ॎॊਓ৾઻भଢ଼஢৫৅਺ৱ஍૨भਈ

घॊਈ੔ഈभଢ଼஢ਝ૟‫୒ૼ؞‬धजभણ৷भঀक़ঁक़॑થघॊপ৾‫؞‬ଢ଼஢ਃଡऋ৴௚खथ‫ؚ‬৸ব৓ऩુ৷৬਑भଡണ॑৯੐घुभदघ‫؛‬X মॼঀॸॡঀট४‫ش‬উছॵॺইज़‫ش‬঒হ঵मॼঀॸॡঀট४‫ش‬पঢ়মহ঵भ৯৓

യਤख‫ؚ‬ਓ঵ੀृଢ଼஢ਠৃऋથघॊૼ୒৓ୖ਻भੰ
ৠषभ॔উট‫୹઀॑ॳش‬घॊधधुप‫ؚ‬ਓ৾઻৴௚
ृ౮ী৙੆়॑௓ਤघॊ‫؛‬৅਺ৱ஍૨भਈপ৲ ॑ৰਠघॊऒध

X ॼঀॸॡ‫؞‬౫મ‫ॹ؞‬ংॖ५पঢ়ॎॊਓ৾઻भଢ଼஢৫

X ਲਗदम‫ؚ‬৪বभNNIN(ਠ૔म৏ಲभNNCI)प৻਀औोॊेअऩॼঀॸॡ

ॖথইছುਡॿॵॺড‫ش‬ॡऋତ૟औो‫ؚ‬ಎ઼॑ુ৷घॊऒधद਼ੀরभ
੫঵ऋૐः‫ؚ‬ଢ଼஢৫৅॑ਤीथःऽघ‫؛‬মহ঵भ৯৓

਴ਛ24ফ২
ॼঀॸॡঀট४‫؞ش‬উছॵॺইज़‫ش‬঒হ঵ऋ৅ଌ

ᵖ

ᵔ

116

਎প

ী৕ଢ଼

๶಍ਸੵ

ী৕੟ସ়ਛ

੕়৹ତ ਗ৖৴௚

૸ୃఐૼপ NIMS JAIST ਦପপ ੡প ੡ੵপ ী৕ଢ଼ ଚপ NAIST ృপ (10)

ਨপ ূਨপ ໒ణপ NIMS ਓ੕ଢ଼ ূপ ূੵপ ଫপ ੡প ௹িੵপ਎প ଚপ ઁপ ಘਆপ ৛ઠপ ਨృପਓ৴ਃଡ (16)ਨপ ূਨপ NIMS ਓ੕ଢ଼ ূপ ੡প ਎প ਉଢ଼ ୤ଢ଼ਃଡ ృপ(11)ৰ઱ುਡਃঢ়

ॼঀউছॵॺम๶಍ଡୗੰෲ‫ؚ‬๶಍ਸੵ‫ؚ‬ী৕‫؞‬੟ସ়ਛभ‫گ‬णभউছॵॺইज़‫ش‬
঒(PF)ऊैऩॉ‫ؚ‬जोझोऋેਯনਚभৰ઱ਃঢ়‫ق‬ುਡ‫ك‬ध৻਀ਃঢ়दଡਛऔोथः
ऽघ‫਀؛‬पൕऑॊेअप‫ؚ‬25১য‫ؚ‬37ುਡऋ૞઺खथःऽघ‫؛‬ऽञNIMSऋ७থॱ‫ش‬ਃঢ়॑૿ढथउॉ‫ؚ‬NIMSम੕়৹ତ‫؞‬ਗ৖৴௚‫؞‬য౫୘ਛ॑ਭऐ੅ढथःऽघ‫؛‬

NIMS

NIMS

৻਀ਃঢ়

๶಍ଡୗੰෲ

७থॱ‫ش‬ਃঢ়

ৰ઱
਋৑

PF

ॼঀॸॡঀট४‫؞ش‬উছॵॺইज़‫ش‬঒भଡਛेॊ଀૿੒઴धऋ়ॎऔॉ‫ؚ‬উছॵॺইज़‫ش‬঒৸৬ऋઈ੾औोथःऽ
घ‫؛‬X ધ৖ఐ৾੄भহ঵੒઴धঘ‫ش‬२ऊैभਹ৷મઽো‫ؚ‬जखथৰ઱ਃঢ়प

X উছॵॺইज़‫ش‬঒भফ৑ਹ৷੯ਯमउेज3000 ੯दघ‫؛‬

ৌૢघॊ3णभউছॵॺইज़‫ش‬঒॑஄ਛख‫ؚ‬ਓ৾઻पৌखथਈ੔
ഈभੑ೾‫؞‬௬੼‫ؚ‬ਸੵ‫ؚ‬੟ସ়ਛभ୭୆॑઀୹घॊधधुप‫ؚ‬ৈ২ऩ੍ରૼ୒धੴ॑઀୹खथःऽघ‫؛‬X ⋇๶಍ଡୗੰෲૼ୒‫⋈ؚ‬๶಍ਸੵૼ୒‫⋉ؚ‬ী৕‫؞‬੟ସ়ਛૼ୒प

মহ঵भ໪ਏ

ᵏᵏ

ᵗ

੡ଽોপ৾

ᚤ⣽ຍᕤPF䠄16ᶵ㛵䠅௦⾲ᶵ㛵䠖ʮ‫ٻ‬ᩥ⛉┬PD䠖బ⸨຾᫛
PO䠖Ọ㔝ᬛᕫ䚸⏣୰❳ኴ⋇৹ତ‫؞‬௓ਤศᏊ䞉≀㉁ྜᡂPF䠄10ᶵ㛵䠅௦⾲ᶵ㛵䠖Ў‫܇‬ᅹ‫ܖ‬ᄂ७থॱ‫ش‬ਃঢ় 䐢ேᮦ⫱ᡂ䞉ᅜ㝿㐃ᦠᢏ⾡ᨭ᥼⪅஺ὶ䚸Ꮫ⏕◊ಟ
‫ق‬NIMS)䐡⏘Ꮫ㐃ᦠ䞉ศ㔝⼥ྜ䐠඲య❆ཱྀ䞉ᗈሗ崣嵛崧嵤ਃঢ়
੟ସ嵣౫મଢ଼஢ਃଡ

䝘䝜䝥䝷஦ᴗᐇ᪋యไ

௹িੵ঵প৾

੡ଽોੵ঵প৾

ᚤ⣽ᵓ㐀ゎᯒPF䠄11ᶵ㛵䠅௦⾲ᶵ㛵䠖NIMS

ఱଐ੔ഈఐ৾ૼ୒প৾
੹প৾

পଚপ৾

ঽேఐ৾ଢ଼஢ਃଡ
ী৕ఐ৾ଢ଼஢ਚ

ଫഏিপ৾

ృପপ৾
ਨృପਓ঵৾୒௓ਤ
ਃଡ㻔㻲㻭㻵㻿㻕

ূ਎ੵ঵প৾

৛ઠপ৾

ಘਆপ৾

ূ਎প৾

ਓ঵ૼ୒੕়ଢ଼஢ਚ

໒ణপ৾੟ସ嵣౫મଢ଼஢ਃଡ

ূਨপ৾

ઁਣপ৾

୤৕ఐ৾ૼ୒ଢ଼஢৫৅ਃଡ

ਦପপ৾૸ୃఐ৾ૼ୒প৾

ਨਲ੊প৾ਨಮ੔ഈఐ৾ૼ୒প৾
੹প৾঩মਉ৕ৡଢ଼஢৫৅ਃଡ

ʮᣃ‫ܖٻ‬

Ў‫܇‬Ὁཋឋӳ঺ˊᘙೞ᧙ࣇኬನᡯᚐௌ
ࣇኬь߻ॼঀॸॡঀট४‫ش‬উছॵॺইज़‫ش‬঒भ௓ਤ৬਑‫ق‬৸ব25১য, 37ੌ௶‫ك‬ศᏊྜᡂ⿦⨨䚸ศᏊタィ⏝䝅䝭䝳䝺䞊䝅䝵䞁䚸䝅䝇䝔䝮㉁㔞ศᯒ⿦⨨ ➼

Ў‫܇‬Ὁཋឋӳ঺㟁Ꮚ⥺ᥥ⏬⿦⨨䚸䜶䝑䝏䞁䜾⿦⨨䚸䜲䜸䞁䝡䞊䝮ຍᕤ⿦
⨨䚸䝇䝟䝑䝍⿦⨨ ➼ࣇኬь߻㉸㧗ᅽ㏱㐣ᆺ㟁Ꮚ㢧ᚤ㙾䚸㧗ᛶ⬟㟁Ꮚ㢧ᚤ㙾䠄STEM䠅䚸ᨺᑕග ➼ࣇኬನᡯᚐௌ

ᵏᵐ

10

117

0

500

1000

1500

2000

2500

3000

3500

࣭㹎㹂

௬੼ಉ

ਾઔ

1,276

2,080

䠘฼⏝௳ᩘ䛾᥎⛣䠚

1,336 1,3431,350 1,347

ȊȎȍȃȈ

2,811
2,667

2,921 2,961

ȊȎȗȩȃȈ

3,027

जभ౎

⅓䙫䟻䩝㩆斉প৾੫঵‫ق‬जभ౎‫ك‬

র৵੫঵

প੫঵

218

566

729

1237

3027੯

৸৬

9
254 14जभ౎੫঵‫ق‬जभ౎‫ك‬Ứ㥔ƋḔ⯶Ứ㥔ƌỨ㥔Ƌ⤎Ứ㥔ƌ

⅓䙫䟻䩝㩆斉኱Ꮫ➼䠄Ꮫእ䠅኱Ꮫ➼䠄Ꮫෆ䠅ᵏᵑᵏᵓਹ৷੯ਯम৐ମभॼঀॿॵ
ॺৎ৻पमফ৑1000੯ங২दखञऋ‫ঀॼؚ‬উছॵॺदम਴ਛ29ফ২द3000੯
पभलथःऽघ‫؛‬जभअठ੫঵भਹ৷म৸৬भ27٫प
୸खथःऽघ‫؛‬ ྠホ౯࡟ࡘ࠸࡚ࠊ◊✲ィ⏬࣭ホ౯ศ⛉఍࡟ሗ࿌ 㹎㹄඲యࡢ஦ᴗ㐠Ⴀ࡟㛵ࡋࠊᑓ㛛ⓗ▱ぢ࠿ࡽຓゝ 㹎㹄඲యࡢ஦ᴗ㐠Ⴀ࡟㛵ࡋࠊホ౯ࡢᐇ᪋㆟㛗 ࣭୺ᰝ
ᵓᡂဨ࣭ጤဨࠊ⮫᫬ጤဨࠊᑓ㛛ጤဨࢼࣀࢸࢡࣀࣟࢪ࣮࣭
ᮦᩱ⛉Ꮫᢏ⾡ጤဨ఍◊✲ィ⏬࣭ホ౯ศ⛉఍⛉Ꮫᢏ⾡࣭Ꮫ⾡ᑂ㆟఍ȊȎȗȩȃȈƸ࣯঺ᧈŴင‫ܖ‬ƴ࣏᪰Ʒ
4&ǤȳȕȩೞᏡǛ੩̓ƠƯƍǇƢ ᚲせ࡟ᛂࡌ࡚ࢼࣀᮦጤဨ఍࡟ሗ࿌ᑓ㛛ⓗ▱ぢ࠿ࡽຓゝ ྛᑓ㛛ጤဨࡣࠊ஦ᴗ㐠Ⴀ࡟㛵ࡋࠊ஦ົᒁ࣭ࢼࣀᮦཧ஦ᐁ௜

࣭ᑓ㛛ጤဨ࣭ࢼࣀᮦཧ஦ᐁ㸦஦ົᒁ㛗㸧࣭㹎㹍ᵓᡂဨ࣭ࢧࣈ㹎㹂㆟㛗ࣉࣟࢢ࣒ࣛ㐠Ⴀጤဨ఍◊✲᣺⯆ᒁ㛗㸦タ⨨ࡢỴᐃ㸧ੑ઺‫؞‬௬੼৬਑

ㄢ㢟ࡢᣢ㎸࣭ㄢ㔠ᢏ⾡࣭㺙㺎㺩㺼㺛
ᥦ౪

ੰෲ

FY21

FY23
ਸੵ

FY22

FY24
়ਛ

FY25

FY26
ॼঀॿॵॺ

FY27

FY29

ᵏᵔ

ॼঀউছॵॺदमୖস਑॑মત଑ো‫؛‬ਹ৷મઽো॑ਝ૟ુ৷ઈ੾प૑ਏऩ৽ા‫ુق‬৷ਝ૟भఊሂા‫ؚ‬଎ራષા‫ؚ‬୾೸਷ાಉ‫ك‬भ঳৖पણ৷ख‫ؚ‬ણ৿ૠெम૶ਛশखऽखञ‫؛‬

FY20

X

FY19

ॼঀॿॵॺ‫ঀॼع‬উছभਛટਁ৫ਹ৷મઽো௓୎

ᵏᵒফ৑भ੒઴ૠெ‫౏੻ق‬ા‫ك‬मउेज15੏৞दघऋ‫ؚ‬ৰ੠भણ৿ૠெम‫ؚ‬૚૞઺ਃঢ়पेॊઈ੾ાઐહসऊैभౄ
ਊ৺18੏৞ृ‫ؚ‬ঘ‫ش‬२‫ش‬ऊैभਹ৷મ৺9੏৞‫ؚ‬जभ౎ઽো৺4੏৞॑அीॊध‫ؚ‬ऒभ೅ਰ঱भ47੏৞ૠெपऩढ
थःॊधৄ஋ुैोॊ‫؛‬ऒभअठ41٫ऋ੍ରपਊञॊૼ୒५ॱॵইभ౻৷प‫ؚ‬৺45٫ऋಎ઼भઈૡৱসपਊथै
ोथःॊ‫؛‬

0

100

200

300

400

500

600

700

FY28

ঘ‫ش‬२‫ش‬രਙ‫؟‬
ਓ঵ੀ 27% ‫ق‬প੫঵20%, র৵੫঵7%‫ك‬প৾ 64% ‫৾ق‬৔28%, ৾ਗ36%‫ك‬ਁ৓ਃঢ় 7%౎ 2%ৗૠঘ‫ش‬२‫૴ش‬ো૨ 53%‫ق‬ফ਴಑‫ك‬জআ‫شॱش‬૨ 47%‫ق‬ফ਴಑‫ك‬X਴ਛ29 (2017)ফभॼঀউছ੒઴ૠெ

‫ͤق‬জআ‫॑شॱش‬ඓ௾खञअइद,1੯भ਴಑ਹ৷যਯ॑2੡धෘ৒‫ك‬ਹ৷੯ਯ‫؟‬13,437੯‫ق‬5ফ৑భस‫ك‬ਹ৷঻ਯ‫؟‬16,042੡ঘ‫ش‬२‫ش‬੒઴ଡୗ‫ి؟‬ਫऩਹ৷મ

৻਀঻‫ؚ‬ҾҴӇӢҬӌҴӄҴ‫ؚ‬৴௚ӓӌҴӀӢҰҴ‫ؚ‬হਜ௺ӁӄҳӐभ౎‫ؚ‬ग़य़५ঃ‫ؚॺش‬ৈ২௧୅ૼ୒঻‫ؚ‬௧୅ૼ୒঻भ૚૙ચ੡ูહଖ঻ऋૼ୒
१‫ش‬অ५पઉமँञॊ

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ਃঢ় 2ী৕‫؞‬੟ସ়ਛPF 11๶಍ଡୗੰෲPF 11

๶಍ਸੵPF16ਃঢ়ॼঀॸॡউছॵॺইज़‫ش‬঒হ঵भ૞઺য৩
‫؞‬๶಍ਸੵPF
271੡
‫؞‬๶಍ଡୗੰෲPF
319੡
‫؞‬ী৕‫؞‬੟ସ়ਛPF 251੡‫؞‬७থॱ‫ش‬ਃঢ়
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উটॢছ঒
ઈ੾੻৩ভ

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PD, POȊȎȆǯȗȩȃȈȕǩȸȠƷǨǳǷǹȆȠǛӕǓࠇƘʴŷ

(௲ਐ৞)

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WEB䝨䞊䝆(https://nanonet. go.jp)ૼ୒ৼ୥ੰෲPFमૼ୒
৻ষऋ੗ः

ૼ୒৻ষ

ૼ୒ଓஃ

ਃஓਹ৷

ਸੵPFमਃஓ
ਹ৷ऋੜਸਹ৷஄ଙमPFपेढथ౮ऩॊ‫؛‬

ॼঀউছॵॺ੕়৓ऩษઠ
‫ق‬७থॱ‫ش‬ਃঢ়‫ك‬ਃஓਹ৷ऋ਌૴दघ
ऋૼ୒৻ষऋੜइॊ
ൊ਱पँॉऽघ‫؛‬ਹ৷஄ଙશਹ৷૾ய

ᵏᵗ

ુ৊ଢ଼஢

ᵏᵗ

ᵏᵕ

়ਛPFमુ৊
ଢ଼஢ऋ੗ः(https://www.nanonet.go.jp/yp/ॖग़ট‫ش‬ঌ‫ش‬४䖃ᡂᯝ㠀බ㛤฼⏝䛿ྛᶵ㛵䛤䛸䛻ไᗘ䛒䜚䖃ᡤᐃ䛾฼⏝ᩱ䜢⣡௜ 䠄ග⇕Ỉ㈝䚸ᾘ⪖ရ㈝➼䛾୍㒊㈇ᢸ䠅

䖃ᡂᯝ䜢බ㛤䠄⡆༢䛺฼⏝ሗ࿌᭩䜢ᥦฟ䠄≉チฟ㢪➼䛾⌮⏤䛻䜘䜚ᥦฟ䜢䠎ᖺ⛬ᗘᘏᮇྍ䠅䠅䖃▱ⓗ㈈⏘ᶒ䛿ྛᶵ㛵䛸䛾ྲྀỴ䜑䛻ᣐ䜛
䠄㏻ᖖ䛾ᶵჾ฼⏝䛷䛿฼⏝⪅ᖐᒓ䛜ཎ๎䠅䖃฼⏝ᙧែᶵჾ฼⏝䚸ᢏ⾡⿵ຓ䚸ᢏ⾡௦⾜䚸ඹྠ◊✲䚸ᢏ⾡┦ㄯ䠄᭷ᩱ䠅䚸䝖䝷䜲䜰䝹䝴䞊䝇䠄↓ᩱ䠅䖃⏦䛧㎸䜏ᚋ䚸฼⏝ዎ⣙䜢⥾⤖䠄⡆᫆᪉ἲ䛻⣙Ḱ᪉ᘧ䛒䜚䠅฼⏝ᩱ⣡௜◊✲⤊஢ᚋ䚸
ሗ࿌᭩䛾ᥦ
ฟ

ᨭ᥼䛾Ỵᐃ
ᐇ᪋

ᡴ䛱ྜ䜟䛫

౑⏝┦ㄯ
⏦䛧㎸䜏

ॼঀউছॵॺਹ৷भ૴ो

ᵏᵖ

௚䛾ᨭ᥼
ᶵ㛵⤂௓

ᵐᵎ

ᵏᵖ

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਋৑ऋ10ফधःअশ਋पॎञॊউট४ख़ॡॺऩभद‫ؚ‬ಥরदৰ઱ਃঢ়भிભ঻ऋ
ઐ৻ख‫ؚ‬ਊੂभਔ௕ऋಲഅऔोऩःॣ‫ش‬५ुऩःधम଒ॉऽच॒‫؛‬१ॖॺঅ४ॵ
ॺदम‫ؚ‬૚ਃঢ়भਊੂभਔಂधிભਔ௙भಲഅ॑ਏடखथःऽघ‫؛‬X

2018ফ২ََઁఝୠణশ྽ਬঃঝ५୤৕ढ़५ॣ‫ॻش‬ঞ‫ش‬२भ৫৅ُ
‫ق‬ঘ‫ش‬२‫؟ش‬ଘૈ঍ॺॽॡ५‫ؚ‬ৰ઱‫ূ؟‬ਨপ‫ك‬

2017ফ২َॺঞথॳMOSଡୗ॑ਝऐञGa2O3३ঙॵॺय़‫ش‬ংজ॔ॲॖ
ड़‫(ُॻش‬ঘ‫ش‬२‫ش‬:ঀঋঝॡজ५ॱঝॸॡঀট४‫ؚش‬ৰ઱:NIMS)

2016ফ২َதৈ஍૨਷ಞଲୗ୾ඡᄘ॑ৰਠखञৗྜྷුჍଡୗभ৅ৄध
जभଡୗੰෲُ‫ق‬ঘ‫ش‬२‫ش‬:੟ਙଢ଼‫ؚ‬ৰ઱:੡প‫ك‬

2015ফ২َ੐৒ఇ੟3,4-४ॡটটওॳঝইख़ॽॹ‫ॺش‬भ়ਛधীෲُ
‫ق‬ঘ‫ش‬२‫ش‬:ఐ૤ଢ଼‫ؚ‬ৰ઱:ী৕ଢ଼‫ك‬

2014ফ২َইॵ৲੟ුჍ॑৷ःञઌ૬ྏਗ୾౺ُ
(ঘ‫ش‬२‫ش‬:ॺॡখঐ‫ؚ‬ৰ઱:੡ੵপ)2013ফ২َ३জ॥থग़ঞॡॺঞॵॺঐॖॡট঍থभ৫৅ُ
‫ق‬ঘ‫ش‬२‫ش‬:জड़থ‫ؚ‬ৰ઱:ূਨপ‫ك‬

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X

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਀༟ૄ௯ବ‫ق‬2018.2.14‫ك‬ःङोु঺ভୖ਻ੰৠषभ๾൴ऋ௬੼औोऽखञ‫؛‬૚ফ২भਈરೖप຤ःञਛટ॑ງஂखथउऌऽखॆअ‫؛‬Xॼঀউছॵॺऊैञऎऔ॒भଢ଼஢ਛટऋলथःऽघ‫؛‬൐ফ২ଜपमથ௙঻प
ेॊ੻৩ভदَೢदञਹ৷ਛટُਯ੯उेलऒभअठऊैਈરೢೖऋ৭यो‫ؚ‬ॼঀॸॡ੕়३থএ४क़঒पउःथ਀༟औोऽघ‫؛‬ೢदञਹ৷ਛટ਀༟

PD,POमધఐ੄ॼঀ౫૞হ઻હभ૙৩धधुप‫ؚ‬૚ৰ઱ਃঢ়षभ१ॖॺঅ४ॵॺ
प৊ষख‫ؚ‬ਠ૾॑པ඼ख‫ੰ॑਻ୖؚ‬ৠघॊञीभउু஫ः॑खथःऽघ‫؛‬X१ॖॺঅ४ॵॺद
ৰ઱ਃঢ়भਔ௙॑નੳ

ᵐᵑ

ᵐᵏ

য౫୘ਛ

ॼঀॸॡঀট४‫ش‬੕়३থএ४क़঒‫ॸঀॼؚ‬ॡঀট४‫ش‬੕়ன‫୒ૼ؞‬ভ৮‫ق‬QDQRWHFK‫ূؚ‬਎অॵॢ१ॖॺ दਛટभ৅਀
৾ੈভदभ৅਀‫ؚ‬னં‫ૢؚ‬৷੟৶৾ভ‫ؚ‬৲৾ভ‫ؚ‬ႀ๶ྰ৾ভ‫؞ঀॼؚ‬ঐॖॡটঅ४ॿ५ன‫ؚ‬ॖঀঋ‫ش‬३ঙথ४কঃথ‫ؚ‬७঑॥থ‫؞‬४কঃথ‫ؚ‬ীෲ‫؞‬ఐ৾ਃஓனಉ
৴௚ঐॿ‫ش‬४ক‫ش‬पेॊর৵੫঵‫ਁ؞‬ਝ૥षभ௮ऌऊऐ ফ২ऽद

⥲ྜ䝅䞁䝫
䝆䜴䝮䛷䛾
ᡂᯝⓎ⾲

nano tech 2017䛷䛾ᒎ♧Ⓨ⾲z ȊȎȗȩȃȈưᨽဇƢǔӸឬƷ২ᘐૅੲᎍǁ২Ꮱᄂ̲੩̓
‫ڀ‬ಆ࿃५य़ঝपૢगथ૙ચ੡ูહଖ਑২॑৫઩
‫ق‬ग़य़५ঃ‫ؚॺش‬ৈ২௧୅ૼ୒঻‫ؚ‬௧୅ૼ୒঻‫ك‬५य़ঝఏ૆॑৒ଝख૚3)दଟਪ‫੻ؚ‬৩ভ॑ৢगथહଖ
‫ڀ‬औैप௎৪भథ๚ਃঢ়षभಢ਋ଢ଼ఊਃভz ȦȸǶȸƷǹǭȫǢȃȗȷʴ஬Ꮛ঺ƴǋᝡྂz μ‫׎‬Ʒ‫ܖ‬ဃǁǋᄂ̲ȗȭǰȩȠǛ੩̓ŴπѪưӖƚλǕΪܱƠƨᄂ̲ȡȋȥȸǛμೞ᧙ƔǒႻʝ੩̓ŵ২ᘐૅੲᎍǍМဇᎍŴ‫ܖ‬ဃǁӼƚƨӲ‫ݦ‬ဇȡȋȥȸǛ੩̓ŵૼᘺፗ২Ꮱȷ᭗ࡇჷᜤǛࢽǔ‫ڎ‬ೞƴ‫ق‬PFૼ୒੍ର঻‫ؚ‬ঘ‫ش‬२‫ؚ৾ش‬েभૼ୒५य़ঝ਱঱‫ك‬

z

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z

ਛટਾઔভಉध৾ੈভனંदभઁਾણ৿

ઁਾણ৿‫؞‬ਹ৷യਤ‫ق‬७থॱ‫ش‬ਃঢ়‫ك‬

ᵐᵒ

ᵐᵐ

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⭰嗋 䦧⹟Ə䫠Ⅼ ῕ᷰƋ⾕䴗㦲怇姊㝷PFƝ⏴⤎ƌబஸ೨਴‫ق‬๶಍ଡୗੰෲPF‫ূ؟‬প‫ك‬଄ুૼ୒တཫೖ‫؟‬৛মᅔ୬‫ق‬๶಍ଡୗੰෲPF‫؟‬੡প‫ك‬

X

Xਹ৷੯ਯ఺लਹ৷મઽোऋফ‫ر‬ੜਸख‫ؚ‬ਹ৷ऋ৒ା‫؞‬ఁপखथउॉ‫ؚ‬ঢ়৴घॊ૛ધਯ఺
ल્ಅলൢਯुফ‫ر‬ੜਸखथःॊ‫؛‬૚উছॵॺইज़‫ش‬঒‫ق‬ਰৣPF‫ك‬भ৻਀ਃঢ়఺लৰ઱
ਃঢ়धभ৴௚৬਑ऋेऎਃચखथउॉ‫ؚ‬ਹ೶ਙभ਱঱ऋ௕ैोथःॊ‫؛‬প৾ಉभଢ଼஢ৡ਱঱षभ๾൴धखथ‫ؚ‬মহ঵भ੍ରपेॊଢ଼஢૛ધभ଺ਬ৷ਯऋାৰप
ੜਸखथउॉ‫଺ؚ‬ਬ৷੯ਯॺॵউ1%఺लॺॵউ10%૛ધुஅऽोॊऒधऊै‫ؚ‬ସभৈःଢ଼
஢੍॑ରखथःॊ‫؛‬মহ঵॑ీਃपਝ૟भુ৷৲఺लୖস਑২भ଑োऋਤिऩन‫ؚ‬প৾पउऐॊુ৷३५ॸ
঒भ੝୓प๾൴खथःॊ‫؛‬বभଢ଼஢৫৅੒઴भ஍ટ৓ણ৷‫ؚ‬ଢ଼஢஍૨भ਱঱प๾൴ख‫ؚ‬ॼঀॸॡঀট४‫؞ش‬౫મఐ৾ૼ୒पঢ়घॊ৽ୡृੴ௙भ໮஋‫ؚ‬ಲഅ॑૭ચधखञ‫؛‬মহ঵द౻৷खथःॊૼ୒੍ର঻भ५य़ঝ਱঱भञीभଢ଼ఊृ‫ؚ‬ঔॳঋ‫ش‬३ঙথ਱঱भ
ञीभ૙ચ੡ูહଖ਑২‫੍୒ૼؚ‬ର঻਀༟॑ষअऩनয౫୘ਛप਄ॉੌ॒दःॊ‫؛‬

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‫كڭق‬৸৬भ૾ய఺ल௬੼

র৑௬੼म‫ؚ‬਴ਛ26ফ২ध਴ਛ29ফ২पষॎोञ‫؛‬ऒऒदम৏঻पणःथງஂघॊ

র৑௬੼भ໪ਏ(1)રೢૼ୒ೖ‫؟‬ൽ੩੎ົ‫ق‬๶಍ଡୗੰෲPF‫؟‬੡প‫ك‬X

X 2016ফ২ૼ୒५ॱॵই਀༟

X ଄ুૼ୒တཫೖ‫؟‬㧲⏊ ⅓⭄

Ƌ⾕䴗⊇ⷌPFƝⱘ⏊⤎ƌƋ⾕䴗⊇ⷌPFƝFAISƌ

X ૼ୒੍ର๾൴ೖ‫ⲟ؟‬㜸 䔘䳧⬷

X રೢૼ୒ೖ‫؟‬ിম ৥ึƋ⾕䴗㦲怇姊㝷PFƝ㝘⤎ƌ

X 2017ফ২ૼ୒५ॱॵই਀༟

໿भৣभৡ੅ठ৓ோ૔भૼ୒५ॱॵইभَွभૼُ॑ਫਊप௬੼
ख‫ؚ‬य़কজ॔஄ਛ॑യਤघॊभु‫ؚ‬মহ঵भ੎ਏऩ঑ॵ३ঙথद
घ‫؛‬َွभૼُभ਀༟

ᵐᵕᵐᵓ

્पୖসঔॹঝृઽ੍ଡୗभଵ৶্
১म౎প৾ृ౎হ঵भ૞અपुऔो
थःढञ

Xর৑௬੼भ໪ਏ(2)০৏ৗૠী৙षभৌૢप਋ୄ‫؛‬প஑ଢ଼஢઱ਝ॑થघॊৰ઱ਃঢ়पणःथम‫ؚ‬ਹ৷भఁপप਱ऐञ্ੁ॑਋ୄ‫؛‬ৰ઱ਃঢ়૯૵दସऋ৳઒औोञ੍ର઀୹भ৬਑ृ‫਀৻ؚ‬ਃঢ়৔प॥‫ॹش‬ॕॿ‫઼॑ॱش‬ःथਹ৷ৼ୥ृૼ୒ৼ୥॑ষअ৬਑॑௬੼‫؛‬ૼ୒৻ষभਏ஦षभৌૢृ੍ରभ঳੧धखथ‫َؚ‬ৗञऩ৻ষঔॹঝُ॑ਫ਼ୈघॊऩन஋ா৓ऩ਄ੌ௅િ॑௬੼‫؛‬০৏म੍ରभସ॑
਱঱औचॊ਄ੌभਘ৲॑਋ୄ‫؛‬XX

ী৕‫؞‬੟ସ়ਛमॼঀॸॡঀট४‫ش‬भমସदँॉ‫ؚ‬মPFऋથ஍पણ৷औोॊेअ‫਀৻ؚ‬ਃঢ়भজ‫شॲش‬३ॵউपਘऎ਋ୄ‫؛‬Xઈ੾ிભ঻ভ৮ಉपेॊহ঵৸৬भ঳৬৓਄ੌभਘ৲ृਖ਻ਡभુથ৲‫ؚ‬ৗૠਹ৷঻भఁপ఺ल౮ী৙৫ิप਱ऐञਓ৾઻৴௚௓
ਤঐॿ‫ش‬४ক‫ش‬भ਄ੌ‫َؚ‬૥ষ৓ਹ৷ُহ঵भ਄ੌಉ॑௬੼‫؛‬ਛટਾઔভृহ঵ງஂ३থএ४क़঒ಉ॑੫઺ख‫ؚ‬মহ঵भੳੴप๳ৡ‫؛‬ਹ৷঻఺लৰ઱ਃঢ়षभ਀༟ृૼ୒੍ର঻਀༟ಉभ਄ੌ
म‫ؚ‬ਹ৷঻ध੍ର঻भ൨্भॖথ७থॸॕঈન৳भ௴ਡद௬੼‫؛‬X
Xْ७থॱ‫ش‬ਃঢ়‫ق‬੟ସ‫؞‬౫મଢ଼஢ਃଡ‫ؚ‬ఐ৾ૼ୒ஷ௪ਃଡ*‫*ٓك‬2017ফ২द७থॱ‫ش‬ਃঢ়धखथभ঵ਜ॑ીവ

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X

Xْ๶಍ଡୗੰෲPF‫਀৻ق‬ਃঢ়‫؟‬੟ସ‫؞‬౫મଢ଼஢ਃଡ‫ٓك‬‫كڮق‬૚PFಉभ૾ய఺ल௬੼

H28(2016)ফ৫઩भધ৖ఐ৾੄ ੔ഈଢ଼ଢ଼஢੦ೕુ৷യਤহ঵दम‫ঀॼؚ‬উছॵॺभ৽ୡ‫؞‬லੌाऋઁऎણ৷औ
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थ‫ؚ‬৸৾भ਑২ਝੑषधఁপ

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Xॼঀউছॵॺऋీਃधऩॉ‫ؚ‬૚৉भপ৾पउऐॊુ৷३५ॸ঒भৗૠଡ
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Xপ৾भ३५ॸ঒੝୓യਤष๾൴
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ਃஓभુ৷॑঳ಽ௓ਤख‫ؚ‬ਗ৖ુ৷૨॑ಌप਱঱औचॊञी‫ؚ‬ఃஈਃஓभছॖথॼॵউ॑ৄઉघऒध‫؛‬z

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X ০৏भহ঵भ্਱ਙ

র৑௬੼भ໪ਏ(3)ᵐᵗ੝ఒषभ਄ॉੌा

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(4) ਹ৷મস
(5) ব੠৲
(6) ହ৥ிભ

ओ஬ലँॉऋधअओकःऽखञ ౎হ঵‫౎؞‬ਃঢ়धभ৴௚യਤ ఞଖखञઇ৩‫؞‬५ॱॵইभ௬੼‫؞‬һҰӜҵ஄ਛയਤz ‫׎∝ܖٻ‬ᄂ↝ો᪃̟ᡶ⅚μ‫↮៊↚ࠝ↞⇮⇩∏⇽⇴⇰↝׎‬Јↆέ‫⇁ݰ‬‫↝ܖٻ‬ᄂᆮ⅚૙Ꮛ⅚↚ɳ↥ᇹɤ↝∅⇩⇝∍∙↗ↆ↕↝ᅈ˟ᝡྂ ≳≩⇁ӕ↹ࠇⅾ⇎⇙⇝⇟⇬∆↞ᡶ҄↝ᡦɥ℉᧹ܹᙲ‫ݣ↧׆‬ϼ ɭမ↖৆ⅷ↺ૼ⇛∞⇹⇟∝ૼ২ᘐ∝ૼᘺፗ↧↝‫ࣖݣ‬ ॹ‫ॱش‬PF৴௚ ংॖड़ृIoT୩ୠभৌૢৡਘ৲ ৗૼ୒৫৅ ഠᄺಎ઼भఊሂ‫؞‬ಌৗ ব੠৴௚‫؞‬ઐ૴ਘ৲z ⇰⇴⇳⇩⇮≔≓࠰↝ɥ↖⅚⇰⇴⇽∏⇩⇮≚࠰↝঺ᧈ∝᫠៫⅚↌↝ഏ↧০৏भୖ਻‫؞‬਄ੌाभ্਱ਙ

ਃஓभਗ৖ુ৷૨॑ेॉ঳ಽৈीॊञीभ਄ੌ

ఐ৾৓ऩཬ௭ਙ‫ؚ‬ॖঀঋ‫ش‬३ঙথभയਤ‫ؚ‬৉ୠषभ๾൴भ‫گ‬णभ௴ਡप೏ਔ

(10) ਗ৖ુ৷भയਤ

(9) ৰ઱৬਑

(8) ॹ‫ॱش‬PFधभ৴௚ NIMSभੲਾଁ়஑੟ସ‫؞‬౫મଢ଼஢ುਡ(MI2I)ध఻৬৓प৴௚

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َ੔ഈુ৷઱ਝ‫୒ૼ؞‬উছॵॺইज़‫ش‬঒ன஦৹ਪWGُपਾઔ੒৒

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५ॱॵইभय़কজ॔஄ਛ‫؞‬ਃஓছॖথॼॵউभৄઉख

IoT, ংॖड़ಉ૗৲घॊਹ৷ॽ‫ش‬६षभৌૢ॑ਘ৲

(2) ਃஓ‫؞‬য౫भਘ৲ఁౄ੐తহඨ(1) ৌૢ୩ୠभਘ৲

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Kanako Inoue, 1Yasufumi Ibuchi, 2Park Pyoyun, 3Yasufumi Hikichi
1

Osaka University, 7-1, Mihogaoka, Ibaraki, Osaka, Japan
2
Kobe University, 1-1, Rokkodai, Kobe, Hyogo, Japan
3
Kochi University, Monobeotsu 200, Nangoku, Kochi, Japan

ABSTRACT
Ralstonia solanacearum causes wilting symptoms in various kinds of economically important
agricultural crops, which leads to a significant reduction in harvesting rate. It is an urgent matter to
GHYHORSDQH൵HFWLYHFRQWUROPHWKRGDJDLQVWR. solanacearum. It is necessary to understand the tomato
roots infection strategy of R. solanacearum by cytologically analyzing the infection site specific
PRUSKRORJLFDOGL൵HUHQWLDWLRQRIR. solanacearum and the change of cell structure of R. solanacearum andtomato roots. However, the sample prepared by using the conventional chemical immobilization method
has insufficient protein fixation by glutaraldehyde and therefore has low cell structure preservation.
Consequently, it is difficult to judge the change for each infection stage. We focused on the reaction
mechanism of glutaraldehyde and amino group of protein, which requires a large amount of oxygen,
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nanobubble water, which is thought to have good permeability into the inside of the cell. As a result, it
was revealed that the dissolved oxygen absorption rate in the case of immersing the sample in the oxygen
QDQREXEEOHZDWHULVVLJQL¿FDQWO\KLJKHUWKDQWKDWLQWKHFDVHRIGLVWLOOHGZDWHU)XUWKHUPRUHLQRUGHUWRLQYHVWLJDWHWKHSURWHLQ¿[DWLRQH൵HFWRIWKHVHVDPSOHVVHFWLRQVFXWRXWIURPWKHUHVLQEORFNSURGXFHGE\WKHFKHPLFDO¿[DWLRQPHWKRGZHUHDQDO\]HGKLVWRORJLFDOO\E\RSWLFDOPLFURVFRSHDQGF\WRORJLFDOO\E\WUDQVPLVVLRQHOHFWURQPLFURVFRSH$VDUHVXOWLPSURYHPHQWRISURWHLQ¿[DWLRQH൵HFWZDVIRXQGLQWKH
sample immersed in oxygen nanobubble water. The results of this experiment led to the development of amethod for preparing biological samples that is good at preserving proteins by using oxygen nanobubbles.
These established methods can be expected to be very useful for cytologically analyzing the interaction
between tomato roots and R. solanacearum.
INTRODUCTION
Ralstonia solanacearum is a multipotent soil pathogenic bacterium which infected from roots of morethan 200 kinds of crops such as tomato and other solanaceous crops and cucumber, ginger, perilla, banana
etc. and caused wilting symptoms. R. SolanacearumZKLFKUHDFKHGWKHURRWVRIWKHWRPDWR¿UVWDGKHUHVWR
the surface of the roots and penetrates into the intercellular space from the roots opening or wound. Then,DIWHUIRUPLQJWKHELR¿OPDWWKHLQWHUFHOOXODUVSDFHVLWWDNHVDQLQIHFWLRQPRGHRILQYDGLQJWKHFRQGXLWE\secreting plant cell wall degrading enzyme [1] [2]. Despite the fact that these processes are very importantfor pathogenicity, details on behavior of R. solanacearum at the intercellular space and interaction with
URRWVKDYHQRW\HWEHHQHOXFLGDWHG7KHUHDVRQIRUWKLVLVVWDJQDWLRQRI¿QHVWUXFWXUHDQDO\VLVE\HOHFWURQ
microscopy. In the case of prepareing roots with relatively many opening sits and the cell structures of R.
solanacearum P LVSUHSDUHGE\FRQYHQWLRQDOFKHPLFDO¿[DWLRQPHWKRGGDPDJHRIWKHFHOOVWUXFWXUHVis large because of insufficiency of protein fixation. Improvement of protein fixation is necessary to
identify the change of cell structure and localization of R. solanacearum in invasion process, and change
RIURRWFHOOVWUXFWXUH*OXWDUDOGHK\GHXVHGDVDSURWHLQ¿[DWLYHSURGXFHVGLK\GURS\ULGLQHVLQWKHSUHVHQFH
of amino groups of proteins. The oxidation reaction of this dihydropyridine forms a pyridinium salt whichis thought to be important for glutaraldehyde-protein crosslinking structure [3] [4] [5], and this oxidation
reaction requires a large amount of oxygen [5] [6] [7].
,WLVPHDQLQJIXOWRHYDOXDWHF\WRORJLFDOO\WKHJOXWDUDOGHK\GH¿[LQJH൵HFWWRFHOOVRIR. solanacearum
and tomato roots which added with oxygen in advance.
122

MATERIALS AND METHODS
I. Quantitative analysis on oxygen absorption of tomato roots
Tomato roots cultured for 2 weeks were immersed in distilled water and oxygen nanobubble solution
for 30 minutes, and the amount of dissolved oxygen was measured by a dissolved oxygen measuring
instrument.
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Samples immersed in distilled water and oxygen nanobubbles were fixed with glutaraldehyde andsubjected to histological evaluation using an optical microscope by toluidine blue staining, and cytologicalevaluation using an electron microscope by double staining with uranium acetate and lead citrate.
RESULTS AND DISCUSSION
As a result of comparing the dissolved oxygen absorption rate of the sample immersed in distilledwater and oxygen nanobubble water, the dissolved oxygen amount of oxygen nanobubble water
UHPDUNDEO\GHFUHDVHG7KLVUHVXOWVXJJHVWHGWKDWWRPDWRURRWVH൶FLHQWO\DEVRUEHGR[\JHQQDQREXEEOHV
inside the cells.Furthermore, as a result of analyzing the fixing effect of the protein histologicallyand cytologically, the dyeability of organelles and cytoplasm of the sample immersed in the oxygen
nanobubble water was improved (Fig.). These results revealed that oxygen nanobubbles penetrate deep
LQWRWKHFHOODQGKDYHWKHH൵HFWRIGUDVWLFDOO\SURPRWLQJWKHUHDFWLRQRIJOXWDUDOGHK\GHDQGDPLQRJURXSFIGURESTEM images of R. solanacearum which incubated in distilled water (left) and in ozygen nanobubble water(right). Bars=500nm.
REFERENCES[1] J. Vassese, P. Frey and A. Trigalet. Mol. Plant-Microbe interact. 8 (2005), pp.241-251.
[2] Y. Hikichi, T. Yoshimochi, S. Tsujimoto, R. Shinohara, K. Nakaho, A. Kanda, A. Kiba and K. Ohnishi. Plant
Biotechnology 24 (2007), pp. 149-154[3] D. Yamada and E.F. Tanaka, J. Mater. Sci. 23 (2004), pp. 300-315.
[4] P.M. Hardy, A.C. Nicholls and H.N. Rydon. J. Chem. Soc. Perkin I. (1976), pp. 958.
[5] H. Ukeda. 化学と生物 . 35, (1997), pp. 496-504.
[6] H. Ukeda, E. Miyazaki, K. Matsumoto and Y. Osajima. Anal. Chem. 58, (1986), pp. 2975.
[7] J.T.A. Johnson. Eur. J. Cell Biol. 45, (1987), pp. 160.

CV

Kanako Inoue
Lecturer of Engineering, Osaka University
In 2009, Kanako Inoue got a degree under the theme of "cytology, biochemistry, molecular biology
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structure, Kobe University. Then, at the same laboratory, as an academic promotion researcher of
NARO-funded research project, the mechanism of autophagy that occurs in the infection processesof Magnaporthe oryzae into Gramineous crops, and of cell death associated with cytoplasmic
incompatibility that occurs by Helicobasidium mompa and Rosellinia necatrix was Cytologicallyelucidated (2009 - 2013). From 2013 to 2015, as a special researcher at the Japan Society for the Promotion of Science,,FRQWLQXHGWRVWXG\FHOOGHDWKDQGLGHQWL¿HGJHQHVDVVRFLDWHGZLWKFHOOGHDWKE\PROHFXODUELRORJLFDODQGF\WRORJLFDO
methods. After 2015, as an specially appointed researcher, various kinds of biological samples and engineering samples
are clarified cytologically and histologically using transmission electron microscope and ultra-high pressure electron
microscope at research center for ultra-high voltage electron microscopy, Osaka University. In 2017, as an associate
professor, cytological analysis of soil pathogenic bacterium R. solanacearum was started, and then in 2018, as anlecturer, I continue to do this research.

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2012ᖺ䛻䛿඲䝀䝜䝮㓄ิ䛜ゎㄞᶵ⬟ᛶᡂศ䜢ྵ䜏䚸೺ᗣቑ㐍䛻᭷⏝䝖䝬䝖䛾⑓ᐖ㜵㝖䜢┠ᣦ䛧䛶኱㜰኱Ꮫ ㉸㧗ᅽ㟁Ꮚ㢧ᚤ㙾䝉䞁䝍䞊஭ୖຍዉᏊ

Liang et al. Molecules (2016)㓟⣲䝘䝜䝞䝤䝹䛻䜘䜛໬Ꮫⓗᅛᐃຠᯝ䛾ྥୖ
䞊Ralstonia solanacearum䛾⣽⬊Ꮫⓗゎᯒ䞊➨17ᅇ䝘䝜䝔䜽䝜䝻䝆䞊⥲ྜ䝅䞁䝫䝆䜴䝮
2019ᖺ2᭶1᪥

䜴䜲䝹䝇

᰿䛛䜙ឤᰁ

䝖䝬䝖䛻ⴎ෼⑕≧䜢ᘬ䛝㉳䛣䛩Ralstonia solanacearum䝖䝬䝖䛻ឤᰁ䛩䜛䝞䜽䝔䝸䜰䛾ឤᰁᡓ␎䛻ὀ┠䛧䛯⑓ᐖ㜵㝖

䝞䜽䝔䝸䜰

䜹䝡

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⓶ᒙ⣽⬊䛾
⓶
䝞䜲䜸䝣䜱䝹䝮
䝹䝮⣽⬊㛫㝽

┦஫ㄆ㆑ᑟ⟶䝯䝷䝙䞁ྜᡂ㜼ᐖ๣ฎ⌮እᒙ䠖䝍䞁䝟䜽㉁䝸䝑䝏
䝨䝥䝏䝗⧞䜚ឤ⣽⬊ቨ⣽⬊㉁䠖䝍䞁䝟䜽㉁䝸䝑䝏

R. solanacearum䝍䞁䝟䜽㉁䛾ᅛᐃ䜢ᨵၿ䛩䜛ᚲせ䛜䛒䜛᰿䛾⣽⬊㓟⣲䝘䝜䝞䝤䝹䜢⏝䛔䛶䝍䞁䝟䜽㉁ᅛᐃຠᯝ䜢᳨ウⴥ䛾⣽⬊㓟⣲䝘䝜䝞䝤䝹Ỉ䝖䝬䝖᰿䜈䛾R. solanasearum䛾ឤᰁᵝᘧ䜢⣽⬊Ꮫⓗ䛻ゎᯒ䝖䝬䝖᰿䛸R. solanacearum䛾⣽⬊ᵓ㐀䛜ಖᣢ䛥䜜䛯ヨᩱస〇䛜ᚲ㡲⣽⬊䛾ಖᏑᛶホ౯ᑟ⟶䜈౵ධ䛧䚸ᑟ⟶䜢㛢ሰ䛥䛫䛶㏻Ỉᶵ⬟䜢పୗ䛥䛫䜛⵨␃Ỉ䝯䝷䝙䞁ྜᡂ䛾㜼ᐖ䛻䜘䛳䛶⣽⬊⭷䛾ᙉᗘ䛜పୗ䛧䛶౵ධ䛷䛝䛺䛟䛺䜛䛔䜒䛱⑓⳦䛿䝯䝷䝙䞁䜢ྜᡂ䛧䛶⮬䜙䛾⣽⬊ቨ䛾ᙉᗘ䜢㧗䜑䛶䜲䝛䛻౵ධ

ྂ㈡༤๎䛂㢧ᚤ㙾䛷ぢ䜛䜲䝛䛔䜒䛱⑓䛾ឤᰁ䛸㜵ᚚᶵᵓ䛃䝯䝷䝙䞁ᒙ䛔䜒䛱⑓⳦䛾⣽⬊Ꮫⓗゎᯒ䛻䜘䜛ຠᯝⓗ䛺㎰⸆䛾㛤Ⓨ䝯䝷䝙䞁䛾ྜᡂ㐣⛬䛾⬺Ỉ཯ᛂ䜢㜼ᐖ䛩䜛䝍䜲䝥䛾⸆๣㛤Ⓨ
MBI-D๣䠄䝅䝍䝻䞁⬺Ỉ㓝⣲㜼ᐖᆺ䝯䝷䝙䞁ྜᡂ㜼ᐖ๣䠅⣽⬊㛫㝽䛷䝞䜲䜸䝣䜱䝹䝮䜢ᙧᡂ䛧䚸ឤᰁ‽ഛ䜢㐍䜑䜛䝖䝬䝖䛻䛸䛳䛶R. solanasearum䛜ᩛ䛷䛿䛺䛔䛸㦄䛫䜜䜀᰿⾲㠃䛻᥋╔

䜶䝣䜵䜽䝍䞊䝍䞁䝟䜽㉁䛾ศἪ

᰿

126

䝖䝬䝖᰿䛸R. solanasearum䛾┦஫ᛂ⟅䜢⣽⬊Ꮫⓗ䛻ゎᯒ䛩䜛ୖ䛷㠀ᖖ䛻᭷ຠ䛺ᡭἲ䛾㛤Ⓨ䛻⮳䛳䛯䚹⣽⬊䛾䜸䝹䜺䝛䝷䛺䛹ᚤ⣽ᵓ㐀䛾ಖᏑᛶ䛜㣕㌍ⓗ䛻ᨵၿ䛥䜜䛯䚹㓟⣲䝘䝜䝞䝤䝹䛾௜ຍ䛻䜘䜚ඃ䜜䛯䝍䞁䝟䜽㉁ᅛᐃ䛜ྍ⬟䛸䛺䛳䛯䚹䜎䛸䜑More chance with Nanotechnology Platform: Next Generation MEMS R&D model
失敗は成功の元 : ナノテクノロジープラットフォームで試して拓く先端集積 MEMS
1, 2

1

Yoshio Mita

Department of Electrical Engineering and Information Systems, Graduate School of Engineering, The University of Tokyo
Bldg. Eng.3-111, 7-3-1, Hongo, Bunkyo-ku, Tokyo 113-8656, Japan

2

VLSI Design and Education Center (VDEC) MEXT Nanotechnology Platform Nanofab Cite Manager, The University of Tokyo
Takeda Building 306, 2-11-16, Yayoi, Bunkyo-ku, Tokyo 113-0032, Japan

Abstract
Rapid deployment of electro information device is one of the keys for realizing super smart society. Insuch society, humans will be supported by a number of network sensors and actuators. Nanotechnology must
play a major role to add unique feature to electro information devices. The author’s quarter-century experience
concludes such rapid R&D scheme becomes possible by forming a team of application, device, and process/material engineers and making them play on the platform. The author call such new style an “agile-style” R&D
scheme. In the presentation, some device examples on CMOS-MEMS integrated devices will be presented.
I. INTRODUCTION
Sensing and Actuation are the key elements for smart society. Sensors collect phenomena in the universe andconvert into electrical information. The information is then processed by either or both of integrated or internetworked computers, then fed back to the universe (actuation). Providing unique applications accompanied withH൶FLHQWGHYLFHVDVTXLFNO\DVSRVVLEOHLVLPSRUWDQWWRZLQLQVXFKFRPSHWLWLYHZRUOGRIGHYHORSPHQW7RGRWKDW
shortening the path from research to deployment is mandatory. In the software research and development, suchacceleration became the issue two decades earlier. One of the “new” software research and development scheme
as an alternative of traditional scheme (waterfall model [1]) is “agile development [2]”. The author is giving aÀLSSHGFODVVVW\OHOHFWXUHRIHOHFWURLQIRUPDWLRQGHYLFHLQKLVXQLYHUVLW\>@EDVHGRQVXFK5 'SULQFLSOH7KH
author has been trying to extend the “agile-style” to R&D of input / output devices [4].
II. “AGILE-STYLE” RESEARCH ON NANOTECHNOLOGY PLATFORM
7KHSULQFLSOHRI³DJLOHVW\OH´FDQEHLGHQWL¿HGDVTXLFNGHYHORSPHQWZLWKFORVHFROODERUDWLRQRIHQJLQHHUVLQ
three layers: application, information processing, and device / process (Fig.1) [4,5].
7UDGLWLRQDOGHYHORSPHQWPRGHORI0(06ZDVDOVRZDWHUIDOOPRGHOELJGHYLFHFRPSDQ\GHYHORSHGLQWHUQDOO\and software engineers could only access through a market. Instead, the author propose that engineers form a
WHDPIURPWKHEHJLQQLQJDQGWU\WRGHSOR\DVVRRQDVWKH¿UVWYHUVLRQRIGHYLFHLVUHOHDVHG7KHGHYLFHPD\QRWVDWLVI\DOOWKHH[SHFWHGGHPDQGVWKH³XVHUV´RIWKHGL൵HUHQWOHYHOLQWKHVDPHWHDPPD\DGDSWWKHPVHOYHVVRDV
WRSURYLGHV\VWHPOHYHOXVHIXOQHVV,WLVWKHUHIRUHSRVVLEOHWRSURGXFH¿UVWHQJLQHHULQJPRGHOZKLOHGHYLFHOD\HU
continue development for the next release.
Level3
Applicaon Layer

Level2
Informaon Processing
and Control Layer

Applicaon Engineer
Social Depolyment
Algorithm Engineer
System Design and
Implimentaon

Level1
Device and Process
Device Engineer
Circuit Engineer
Layer
Control/Sensing Circuit MEMS Design

䞉Control Theory
䞉Informacs
䞉Design Methodology

Process Engineer
MEMS Fabricaon

Figure 1. Close collaboration of engineers in three-layers accelerates R&D for smart society.

128III. “AGILE-STYLE” RESEARCH OF CMOS-MEMS WITH UTOKYO VDEC
Such “agile-style” R&D requires an established platform to test their new idea. Nanotechnology Platform as
ZHOODV9/6,'HVLJQDQG(GXFDWLRQ&HQWHURIWKH8QLYHUVLW\RI7RN\RLVR൵HULQJVXFKSODWIRUPWRFRPSDQLHVand researchers. The author have established an integrated VLSI-MEMS fabrication scheme through suchplatform (Fig.2) [5]. Using that platform, the team can quickly test his/her idea in a very inexpensive way. Trial
is one of the best way for engineer to learn by him/herself what he/she have omitted. In the presentation, theauthor try his best to share his experience accompanied with example devices such as on-chip power source andintegrated chemical sensor.
Unique laboratory who have real access to
VLSI w/MEMS process in Class 1 supercleanroom
Researcher A

Shared Design
Japanese LSI Industry

Researcher B…

UTokyo VDEC 600m2 supercleanroom
Reliable
VLSI Wafer

Integrated Device with
Unique Funconality

Figure 2. CMOS Post-Process Research and Development Scheme at UTokyo VDEC

References[1] H. D. Benington, “Production of Large Computer Programs”, IEEE Annals of the History of Computing, 5 No. 4, pp. 350-361. (1983.10)[2] Jim Highsmith, “History: The Agile Manifesto”, URL:http://agilemanifesto.org (2001)[3] Yoshio Mita and Yoshihiro Kawahara, “A 15 years of Educational Experience on Autonomous Electronic Information Devices by
Flipped-Class and Try-by-Yourself Approach”, IET Circuits, Devices & Systems, 11, Issue 4, pp.321-329 (2017.06.04)[4] Yoshio Mita, Eric Lebrasseur, Matthieu Denoual, Kentaro Yamada, Julien Grand, Yuki Okamoto, Rangareddygari Ranga Reddy, TixierMita Agnès, Svetlana Mintova, and Akio Higo, “Agile-Style Development of CMOS-Integrated Micro Electro Chemical Mechanical
Systems by LSI Foundry and Nanotechnology Platform (Invited Talk)”, 2018 IEEE International Symposium on Electronics and Smart
Devices (ISESD), Bandung, Indonesia (2018.10.23)[5] 三田吉郎、「MEMS デバイス徹底入門」3 章 12 節、日刊工業出版社、ISBN978-4-526-07871-2 C3054 (2018.08.30)[6] Yoshio Mita, Eric Lebrasseur, Yuki Okamoto, Frédéric Marty, Ryota Setoguchi, Kentaro Yamada, Isao Mori, Satoshi Morishita, Shu
Inoue, Yoshiaki Imai, Kota Hosaka, Atsushi Hirakawa, Masanori Kubota, and Matthieu Denoual, “Opportunities of CMOS-MEMS
Integration through LSI Foundry and Open Facility”, Japanese Journal of Applied Physics, 56, No.6S1, 06GA03 (2017.05.19)[7] Yoshio Mita, Naoyuki Sakamoto, Naoto Usami, Antoine Frappé, Akio Higo, Bruno Stefanelli, Hidehisa Shiomi, Julien Bourgeois, andAndreas Kaiser, “Micro-scale ultra high frequency resonant wireless powering for capacitive and resistive MEMS actuators”, Sensors
and Actuators A: Physical, 275, pp. 75-87 (2018.06.01)

Dr. Yoshio Mita is an Associate Professor since 2005 at the Department of Electrical Engineering
and Information System, the University of Tokyo, where he received his Bachelor (1995), Master(1997) and Ph.D. (2000). After his Ph.D., he was appointed as an Assistant Professor at the VLSI
Design and Education Center (VDEC), and then promoted as a Lecturer at the Department ofElectrical Engineering in 2001. Following his Ph.D. on VLSI integrated intelligent Micro Electro
Mechanical Systems, which he named “Smart MEMS”, he aims at establishing methodologicalplatform in order to produce integrated systems on chips for academic and industrial applications. In'U0LWDUHFHLYHGWKH¿UVW³%HVW7HDFKLQJ$ZDUG´IURPWKHIDFXOW\RI(QJLQHHULQJ
Dr. Mita is the manager of the micro-nano fabrication platform at VDEC of the Universityof Tokyo, supported by MEXT Nanotechnology Platform. He is responsible of the high quality
equipment multi-use program in the Federal Class 1 Super Clean-Room at Takeda Building, jointly
operated with School of Engineering. Thanks to his democratic and open way of management, there
is more than 310 independent research teams that used this facility during last seven years, among
which 81 were industrial teams. In 2017, more than 500 people from 140 teams were active members. In France, there is anequivalent platform called EuroNanoLab – RENATECH (CNRS). With RENATECH, Dr. Mita is organizing since 2013 several
shared exchange projects, such as co-organizing the JNTE colloquia (Journée (intern)Nationale de la Technologie Emergente) 2015
and 2017, and the international exchange project for research engineers on nanotechnology. From Academic aspect, Dr. Mita is a
Host Professor at LIMMS (Laboratory for Integrated Micro Mechatronic Systems), CNRS-UTokyo IIS UMI 2820 since 2001, to
promote joint research project on Intelligent MEMS. Along with these two networks, Dr. Mita is also promoting French-Japanese
research project collaborations: PAI Sakura 2003, CNRS PICS 2016, CNRS PEPS 2012, JSPS-CNRS bilateral projects in 2016 and2018, and two French ANR projects (as LIMMS member) in 2012 and 2016.

129

130

Touch
Pressure
SensorBend Sensor

Accelerometers

Bend Sensor

ISESD 2018 MITA, Yoshio䝅䝸䝁䞁⣔䛂㞟✚໬MEMS䛃

Bend Sensor

Load Sensor

3

Gyroscope

Load Cell⛅ⴥཎ䛷ධᡭ䛷䛝䜛䛂MEMS⣲Ꮚ䛃኱つᶍ㞟✚䝅䝇䝔䝮タィᩍ⫱◊✲䝉䞁䝍䞊 ༠ຊᩍဨᩥ㒊⛉Ꮫ┬䛂䝘䝜䝔䜽䝜䝻䝆䞊䝥䝷䝑䝖䝣䜷䞊䝮䛃ᮾி኱Ꮫᚤ⣽ຍᕤᣐⅬ䛆㉸ᚤ⣽䝸䝋䜾䝷䝣䜱䞊䞉䝘䝜ィ ᣐⅬ䛇䝬䝛䞊䝆䝱ᮾி኱Ꮫ኱Ꮫ㝔 ᕤᏛ⣔◊✲⛉ 㟁Ẽ⣔ᕤᏛᑓᨷ ෸ᩍᤵ୕⏣ྜྷ㑻MorechancewithNanotechnologyPlatform:
NextGenerationMEMSR&Dmodelኻᩋ䛿ᡂຌ䛾ඖ:䝘䝜䝔䜽䝜䝻䝆䞊䝥䝷䝑䝖䝣䜷䞊䝮䛷ヨ䛧䛶ᣅ䛟ඛ➃㞟✚MEMS(CMOS)IC,orLSI

MEMS

Input

Computing(MicroProcessor)

Output(Actuator,
Network)

2

ISESD 2018 MITA, Yoshio

4 MEMS⣲Ꮚ䠖䛂ព࿡䛒䜛᝟ሗ䛃䜢㟁Ꮚ᝟ሗ䛻ኚ᥮䛩䜛 䛂ฟຊ䛃䜢ྖ䜛MEMS⣲Ꮚ䜒᭷䠄䝕䜱䝇䝥䝺䜲➼䠅

Universe 㟁Ꮚ᝟ሗ䝅䝇䝔䝮䠖䛂ධຊ䛸䚸ฎ⌮ᅇ㊰䛸䚸ฟຊ䛃

MEMS䛿Society5.0䛾䛂୺ᙺ䝕䝞䜲䝇䛃

ISESD 2018 MITA, Yoshio䛂䛆㞟✚໬䛇㞟✚ᅇ㊰䛃䛾່䜑䜸䞊䝥䞁䝣䜯䝅䝸䝔䜱䜢㏻䛨䛯

withMEMS“Agile”Ͳstyle㛤Ⓨᮏ᪥䛾Ⓨ⾲ෆᐜ:131

5

ISESD 2018 MITA, Yoshio

11ㄡ䛜䝤䞊䝮䜢స䜛䠛ḟ䛻᮶䜛䝤䞊䝮䛿䠛ᮏ᪥䛾ㄢ㢟䠄䠎䠅

ISESD 2018 MITA, Yoshio

1995 BioMEMS Evolution
1995 Research on Gyroscopes
2010s’ : More than 10% / year
2000 Optical MEMS in market
growth in the market > Trillion Sensors

1994 Deep RIE Patented
1995 Digital Micromirror Device

1993 MUMPs Standard Created by DARPA

1982 Pr. K.Petersen (IBM Research)“Silicon as a Mechanical Material”

1958 Pr. R. Feynmann (CalTech)“There’s Plenty Room at the Bottom”

1988 1st MEMS Conference

1979 Inkjet Printer Head1970 Silicon Accelerometer

1950 First Si Strain Gauge
1961 Silicon Pressure Sensor
1967 Surface Micromachining

1948 First Transistor䛂᪂䛃ศ㔝䛾MEMS䛸ᮇᚅ䛥䜜䜎䛩䛜…

ISESD 2018 MITA, Yoshio

55 years old

32 years old
1879 Edison’s Carbon Bulb Light(filament made of Japanese Bamboo)
32 years old1881 1st Electrical Train (Siemens)
1889 Radio Wave Demonstration by
Hertz 27Yoshio
years old
ISESD 2018 MITA,
1901 Radio Telegraph over Atlantic by Marconi

1847.12.12 Siemens GmBH for Telegraph 31 years old
Machine Fabrication
1866 7 D.C. Electricity Generator Patents(Siemens, Wheatstone, and Varley)
1867 Maxwell’s Equation 36 years old1831 Michael Faraday: Electric Induction 40 years oldtheory1836 Telegraph by Morse 47 years old

1800 A. G. Volta 1st Electrical Battery

19ୡ⣖䛾೧኱䛺Ⓨ᫂䛆䝯䝰ḍ䛇

(Between me andmy students!)

Very Young Age

13

Mid and Old ages
(Between me and my profs)6ḟ䛻᮶䜛䝤䞊䝮䛿䠛ᮏ᪥䛾ㄢ㢟䠄䠍䠅132

ISESD 2018 MITA, Yoshio

33 years old
Hakunetsusha (1890)
14
Hitachi Seisakusho (1911)

37 years old

Mr. Namihei Odaira

31 years old
Osaka Light Corp.(1888)
Iwadale Electric. Trade.(1894)
NEC (1897) 40 years old

Mr. Kunihiko Iwadare

29 years oldTokyo Light Corp.(1886)

Mr. Ichisuke Fujioka

Example:

䛆䝯䝰ḍ䛇

vs

ISESD 2018 MITA, Yoshio

16

Conclusion:
New generation can
CREATE new demand.

 ᪂ᢏ⾡䜒୍䛯䜃័䜜䜛䛸᪂䛧䛔䜒䛾䜈䛿஌䜚᥮䛘ᅔ㞴 䛂䜲䝜䝧䞊䝅䝵䞁䛾䝆䝺䞁䝬䛃᪂䛧䛔ୡ௦䛜᪂䛧䛔ୡ⏺䜢స䜛

26 years old

Professor W. Ayrton᪥ᮏ䛻䛚䛔䛶䜒
MEMS䜢ୡ௦䛷⪃䛘䜛䛸ᮏ᪥䛾ㄢ㢟䠄䠏䠅

ISESD 2018 MITA, Yoshio

15

ISESD 2018 MITA, Yoshio

17䝤䞊䝮䛻຾䛴䛻䛿䠛ㄡ䛜䝤䞊䝮䜢స䜛䠛ḟ䛻᮶䜛䝤䞊䝮䛿䠛

Young

1948 First Transistor
Bulk
1950 First Si Strain Gauge
1 generation= 20 years
MEMS
1961 Silicon Pressure Sensor
2nd Gen.
Generation
gap: Many things are forgotten
1967 Surface Micromachining
SurfaceMEMS
Fully1970 Silicon Accelerometer
Functional
3nd Gen.
1979 Inkjet Printer Head
DRIE
Prof.
1988 1st MEMS Conference
MEMS
Ageing S.Sugiyama
4th Gen.
1993 MUMPs Standard Created by DARPAMy Prof.
1994 Deep RIE Patented
H. Fujita
1995 Digital Micromirror Device
FutureRetire1995
BioMEMS Evolution
Myself MEMS
1995 Research on Gyroscopes
My Students
2000 Optical MEMS
5th Gen.
2016: Now

Concept
Proof
1st Generation

133

ISESD 2018 MITA, Yoshio

21

Application 䝣䜱䞊䝹䝗᳨ド
Deployment䜰䝥䝸䜿䞊䝅䝵䞁
䜶䞁䝆䝙䜰

Step by step development
Relatively simple target (e.g. acceleration)
Engineers work separately.
Long development time (typically 10 years)

Device

ศ㞳䟿

䝕䝞䜲䝇
䜶䞁䝆䝙䜰

ఏ⤫ⓗ㛤Ⓨ᪉ᘧ:Waterfallmodel

ISESD 2018 MITA, Yoshio

1995 BioMEMS Evolution
1995 Research on Gyroscopes
2010s’ : More than 10% / year
2000 Optical MEMS
growth in the market > Trillion Sensors

1994 Deep RIE Patented
1995 Digital Micromirror Device

19

1982 Pr. K.Petersen (IBM Research)“Silicon as a Mechanical Material”

1993 MUMPs Standard Created by DARPA

1988 1st MEMS Conference

1979 Inkjet Printer Head1970 Silicon Accelerometer

1950 First Si Strain Gauge
1961 Silicon Pressure Sensor
1967 Surface Micromachining

1958 Pr. R. Feynmann (CalTech)“There’s Plenty Room at the Bottom”

MEMS䛾Ṕྐ䛻ぢ䜛㛤Ⓨ䝰䝕䝹

1948 First Transistor

Application䝣䜱䞊䝹䝗᳨ド
Deployment

༠ዌⓗ㛤Ⓨ

䝕䝞䜲䝇䠃
䜰䝥䝸䜿䞊䝅䝵䞁
䜶䞁䝆䝙䜰

Ensemble!

20

ISESD 2018 MITA, Yoshio

22

Simultaneous device and application develop.
Various application specific targets
Engineers work collaboratively.
Short development time (say, 5 years)䝣䜱䞊䝗䝣䜱䞊䝹䝗᳨ド 䝞䝑䜽
Deployment䜰䝥䝸䜿䞊䝅䝵䞁
䜶䞁䝆䝙䜰

ศ㞳䟿

Step by step development
Simple target (e.g. acceleration)
Engineers work separately.
Long development time (typically 10 years)

Device䝕䝞䜲䝇䜶䞁䝆䝙䜰᪂䝰䝕䝹:Agilemodel

ISESD 2018 MITA, Yoshio

10ᖺ௨ୖ䛾㛤Ⓨ᳨ド䜢⤒䛶䝬䞊䜿䝑䝖䛻ฟ䜛

DMD: over 10 years of development (sic)Gyro: developed mid 1990s , on market: mid 2000s.

 ᫬㛫䛜䛛䛛䜛

MEMS䝕䝞䜲䝇䛾㛤Ⓨ䛻䛿

134
23

ISESD 2018 MITA, Yoshio

Macro Scale Fab Lab

Machine Type
Laser Cutter
Laser Cutter
3D Printer
3D Printer
PCB mill
PCB mill
PCB fab.
PCB placement
NC Machine
NC Machine
NC Machine
Soldering
SoftwareAnalyzer
Oscilloscope
PCs

Model Name
Universal Systems VLS4.60
Commax 250W laser
3D Systems 3D touch
AFINIA H800
LPKF Protomat S62
LPKF Protomat S103
LPKF PhotoConduct Silk Screen
LPKF ProtoPlacer / Furnace
Roland MDX 40A for organic
Roland MDX 540S for light metal
Original Mind 300mm x 200mm
over 20 soldering irons, tools
PCB design: CadSoft Eagle
USB connected Logic Analyzers
USB connected poket oscilloscopeover 40 shared PCs

32“EE Engineering experimental room ”
䞉Since 2003.
䞉Funded by educational programs such as
Global COE programs, Undergraduate Openexperimental course of Engineering Faculty,
and VDEC
䞉Open to Students with card gate access / WEB
camera surveillance

1.5䞄᭶䛷䛾Ⓨ⾲䜢ྍ⬟䛸䛩䜛䛂ᏛෆFabLab䛃

ISESD 2018 MITA, Yoshioᮾி኱Ꮫ䛻䛚䛡䜛ICT⣲Ꮚ䠄㟁Ꮚ᝟ሗᶵჾ䠅ᩍ⫱䜢ぢ䛶䜏䜛

 Information and Communication Technology (ICT) 䝋䝣䝖䜴䜵䜰㛤Ⓨ䛷⏝䛔䜙䜜䛯䝰䝕䝹.

㛤Ⓨ䝰䝕䝹䛾ཎᆺ:

Commenting
Professor

Presenting
Students

ISESD 2018 MITA, Yoshio

Angel
Entrepreneur

Live Image

Many Students 䠏䡚䠐䝁䝬䠄䠏䠍䠑䡚䠐䠎䠌ศ䠅䛜Ⓨ⾲ᶵ఍Ⓨ⾲఍䛾ᵝᏊ

ISESD 2018 MITA, Yoshio

 “Electro Information Device” must include:(1) Input, (2) Processing Unit, and (3) Output ‽ഛᮇ㛫: 2㐌㛫 – 1.5䞄᭶.

“㟁Ꮚ᝟ሗᶵჾ”䜢ᥦ᱌䛧䚸௰㛫䛾๓䛷䝕䝰Ⓨ⾲䛩䜛䛣䛸㟁Ꮚ᝟ሗᶵჾᏛ䛾᭱⤊ㄢ㢟䠖Give students the opportunity to create something with electronics.

㟁Ꮚ᝟ሗᶵჾᏛ

33

Video
Assistant

31

135

Mr. Ogawa

ISESD 2018 MITA, Yoshio

NASA exhibition
chief

SomeSnapshots

ISESD 2018 MITA, Yoshio

Mr. Shiro

 Stichable, Programmable, Replacable Keysets
 Mr. Shiro and Mr. Ogawa

Device#EI14Ͳ1Ͳ03“Trickey”

40

38

39

ISESD 2018 MITA, Yoshio ኻᩋ ($ 30,000 goal $18,681 pledged) Reason according to Mr. Shiro: “I could not convince theuniqueness of the device” – cf. Descartes’ 4th method41Ꮫ㒊⏕䛻䜘䜛䜽䝷䜴䝗䝣䜯䞁䝕䜱䞁䜾

ISESD 2018 MITA, Yoshio

 Cooperation with Industrial Relationship Division As TodaiToTexas (TTT) Project

ExhibitedatSxSW Interactive

136
42

2017 MITA, Yoshio䛆ㄢ㢟䛇MEMS䞉䝉䞁䝃⏺䛷䛾㉁ⓗኚ໬䛿ྍ⬟䛛䠛
45

http://www.microfan.jp/booster/clcd booster 䛂䛷䛝䜛䛣䛸䝧䞊䝇䛃䛛䜙䛂䜔䜚䛯䛔䛣䛸䝧䞊䝇䛃䜈῝໬

 (䝕䝣䜯䜽䝖䠅ᶆ‽䝥䝻䝖䝍䜲䝢䞁䜾䝪䞊䝗䛸᪤〇I/O 䛂ᐇ⿦ᡭẁ䛃䛾኱⾗໬ 䝽䞁䝏䝑䝥䛂䝟䝋䝁䞁䛃 䛂₇⟬⿦⨨䛃䛾㧗ᗘ໬

 3D䝥䝸䞁䝔䜱䞁䜾 FabLab 䛂ヨసᡭẁ䛃䜈䛾䜰䜽䝉䝇ᐜ᫆໬ Deploy or Die䜢ྍ⬟䛻䛧䛯䚸⎔ቃ䛾㉁ⓗኚ໬䠏Ⅼ䠖㟁Ꮚ᝟ሗศ㔝䛾⇕Ẽ䛾⛎ᐦ䠄୕⏣䛾ゎᯒ䠅

ISESD 2018 MITA, Yoshio㟁Ꮚ᝟ሗᶵჾᏛ䠎䠌䠌䠔ཷㅮ⏕2010 Batchelor,2010 2012 Master on Voice Processing
2012 2014 Consulting Company
2014 AgIC UTokyo venture company CEO䜰䞁䝖䝺䝥䝺䝘䞊䛷ᡂຌ䛧䛯ཷㅮ⏕䛾୍ே…asof2014

46

with Nanotechnology Platform

ISESD 2018 MITA, Yoshio

YES!

Myanswer:,VLWSRVVLEOHWRGRVXFKDJLOH
GHYHORSPHQWZLWK0(06""Myquestion::H0(06GHVLJQHUVDOVRZDQWWKHVDPHVXFFHVVVWRU\୕⏣䛾ㄢ㢟ព㆑: Students now have obtained strong realization methods of IoT > Dreams come
44
ISESD 2018 MITA, Yoshio
true!

“Infrared Communicating Moouse” 2005
“Trickey”: 2014 award winning device. A reconfigurable,
award winning device. Commercial mouse was extensible “minimalist keyboard”.
transformed to wireless device.
Applied to Kickstarter cloud funding.
“Good idea, poor relalization”

Lecture“ElectroͲInformatic Device2005”䠎䠌䠌䠑э䠎䠌䠍䠐ẚ㍑䠖Ꮫ⏕䛾ពḧ䛿䛛䜟䜙䛪Ꮫ⏕䛾సရ䛾㉁䛿๻ⓗ䛻ྥୖ

137䠄䜘䜚㔜せ䠅᫬㛫: ᭱ప2ᖺ
 ᭱ప2ᖺ
 ᭱ప2ᖺ
 ẖᖺ…

䛸䚸᫬㛫

47

2017 MITA, Yoshio49᪂䛧䛔䝬䜲䜽䝻䝅䝇䝔䝮䛾䜰䜲䝕䜱䜰䜢ヨ䛧ᐇຠᛶ䜢♧䛩๓䛻ᕧ㢠䛾ᢞ㈨䛻䜘䜛䜽䝸䞊䞁䝹䞊䝮䛜䛒䜙䛛䛨䜑ᩚഛ䞉⥔ᣢ䛷䛝䛶䛔䛺䛟䛶䛿䛺䜙䛺䛔(YOU must) get prepared and maintained expensive cleanroom
BEFORE you try new idea on microsystems.

せ䛩䜛䛻,

MEMS䝷䜲䞁䛻ᚲせ䛺ண⟬: 䜽䝸䞊䞁䝹䞊䝮タ⨨ ⿦⨨ᑟධ 䜶䞁䝆䝙䜰䛾㞠⏝䞉カ⦎
 …䛣䜜䜢⥔ᣢ䛧⥆䛡䜛 ㈨㔠䠄ᙜ↛䠅㛗ᮇ㛫ᢞ㈨䛾୰㌟䠖

2017 MITA, Yoshio ᩍ⫱䛻䜘䜛䛂ᖖ㆑䛾⩦ᚓ䛃 䜸䞊䝥䞁䝋䞊䝇άື䜢ཧ⪃䛻䛧䛯䛂▱㆑䛾䝛䝑䝖䝽䞊䜽໬䛃 䛂ᐇ⿦ᡭẁ䛃䛾኱⾗໬ 㞟✚໬MEMS 䛂⣲Ꮚ䛃䛾㧗ᗘ໬ 䝘䝜䝔䜽䝜䝻䝆䞊䞉䝥䝷䝑䝖䝣䜷䞊䝮 䛂ヨసᡭẁ䛃䜈䛾䜰䜽䝉䝇ᐜ᫆໬ MEMS䞉䝉䞁䝃⏺䛷䛾㉁ⓗኚ໬䛿䚸ྍ⬟䟿୕⏣䛾ணゝ
2nd:ᘓ≀
3rd:Cleanrooms

2017 MITA, Yoshio

2017 MITA, Yoshio

Nanotechnology Platform

YES!

 Is there any short cut way?

CommonQuestion:

6th:ඃ⚽䛺䜶䞁䝆䝙䜰

50

48

5th:⿦⨨

4th:䜲䞁䝣䝷

㛗ᮇ㛫䛾ᢞ㈨䛜ᚲせ1st:ᅵᆅ☜ಖ

MEMS䛿⿦⨨⏘ᴗ..

138

2017 MITA, Yoshio

2017 MITA, Yoshio

 2014.11䜎䛷䛻2038ྡᘏ䜉Ⓩ㘓䚹634ྡⓏ㘓э 2016.12䜎䛷䛻2763ྡᘏ䜉Ⓩ㘓䚹768ྡⓏ㘓,ᖺ㛫501ྡ฼⏝ ᖺ㛫ண⟬ 2012ᖺᗘ 1.2 ൨෇ э 2016ᖺᗘᖺ㛫ண⟬䠄⤖ᯝ䠅2.3 ൨෇ ேⓗᥐ⨨䚸ண⟬ᥐ⨨䛿ⓙ↓䛾≧ែ䛛䜙㐠⏝䜢㛤ጞ䛧䛯53 䛂ᕤᏛ㒊 ඛ➃▱㧗ᗘᶵ⬟䝕䝞䜲䝇䝷䝪䝷䝖䝸䞊䝈䛃✚ᖺ䛾㢪䛔䛂㛤䛛䜜䛯ඹྠ฼⏝䝇䝨䞊䝇䛸䛧䛶䛾䜽䝸䞊䞁䝹䞊䝮䛃 ᮾ኱ึ䛾ಶேྡ䜢ṇᘧྡ⛠䛻ෙ䛩䜛ᘓ≀

 2003ᖺ❹ᕤ ᐤ௜ඛ䠖ᕤᏛ⣔◊✲⛉䠄ᑠᐑᒣᏹ◊✲⛉㛗䠅䛸኱つᶍ㞟✚䝅䝇䝔䝮タィᩍ⫱◊✲䝉䞁䝍䞊䠄ὸ⏣㑥༤䝉䞁䝍䞊㛗䠅 ⤒῭άື䛷ᚓ䛯ᐩ䜢⏕ά⪅䛾䛯䜑䛾◊✲άື䜈㑏ඖ䛧䚸䜘䜚㇏䛛䛺♫఍䜢๰䜚䛯䛔䛸䛔䛖㊃᪨䛻䜘䜚䚸Ṋ⏣㑳ኵẶ䠄⌧䜰䝗䝞䞁䝔䝇䝖๰ᴗ⪅䞉ᨾே䠅䛻䜘䜛ᐤ௜ᮾி኱ᏛṊ⏣ඛ➃▱䝡䝹タ❧⤒⦋L1 ᩥ⛉┬
L2 JST/㐠Ⴀ⤫ᣓ఍㆟
L3 䝉䞁䝍䞊ᶵ㛵䠄NIMS䠅
L4 ௦⾲ᶵ㛵䠄ி኱䠅
L5 ௦⾲⪅఍㆟䠄໭኱䞉ᮾ໭䞉ᮾ኱䞉NIMS䞉AIST䠅
L6 䝁䞊䝕䜱䝛䞊䝍䞊䠄ி኱䞉AIST䠅51
L7 ᐇ᪋ᶵ㛵䠄16ᶵ㛵䠅52

2017 MITA, Yoshio

54 㞟✚MEMS䛾ᑓ㛛ᐙ䛷䛒䜛୕⏣䛸䛭䛾௰㛫䛯䛱䠄TeamMEMS䠅䛜䚸 ⮬ศ㐩䜒୍฼⏝⪅䛸䛧䛶䠄᭷ൾ䛷䠅฼⏝䛩䜛◊✲⎔ቃ䜢 ୡ⏺䛾ⓙᵝ䛸බᖹ䛻ศ䛛䛱䛒䛔฼⏝䛩䜛ᣐⅬ䜢䚸┠ᣦ䛧䛶䛔䜎䛩䚹

ᮾ኱ᣐⅬ㐠⏝䝫䝸䝅䞊

2017 MITA, Yoshio◊✲㛤Ⓨ䛾㎿㏿䛺❧䛱ୖ䛢䛜ྍ⬟䛸䛺䛳䛯䐟᭱᪂䛾⿦⨨䜢౑䛘䜛ሙᡤ䛜බ㛤䛥䜜䐠⿦⨨䛿Ⰻ䛟⥔ᣢ⟶⌮ㄪᩚ䛥䜜䐡ᗮ౯䛻฼⏝䛷䛝䜛 ฼⏝ᙧែ䠖⿦⨨฼⏝䚸ᢏ⾡௦⾜䚸ᢏ⾡ᨭ᥼䚸ᢏ⾡┦ㄯ (ྛᣐⅬ䛾᪉㔪౫Ꮡ)

1st phase: 2002 2007 (5 ᣐⅬ)
2nd phase: 2007 2012 (13 ᣐⅬ)
3rd phase : 2012 2021(16 ᣐⅬ)䝘䝜䝔䜽䝥䝷䝑䝖䝣䜷䞊䝮䛻䜘䜚኱ᆺண⟬䛜௜䛔䛯䛸䛧䛶䜒䚸㌶㐨䛻஌䜛䛻䛿㍍䛟4䠈5ᖺ䛛䛛䜛⥔ᣢ䛻䛿ẖᖺ൨䜢㉸䛘䜛㈝⏝䛜⥅⥆ⓗ䛻ᚲせ䚹䐟ሙᡤ䛸⿦⨨䛾ྲྀᚓ䠄㉸኱ᆺண⟬䠅䐠⎔ቃ䛾❧䛱ୖ䛢ㄪᩚ䐡⥔ᣢ⟶⌮䠄ᩍ⫱䞉䝷䞁䝙䞁䜾䝁䝇䝖䠅䝘䝜䝔䜽᪂つ஦ᴗ䛻䛿䛰䛛䜛3䛴䛾ቨ Open to Industry, Research Institutes
and Universities ᩥ㒊⛉Ꮫ┬10 ᖺ䝥䝻䝆䜵䜽䝖

Hokkaido U. Toyota TI
Tohoku U.
NagoyaAIST
Kyoto U.
 1.67B yens/year
NIMS
Osaka U.
 Nationwide Open Facility Platform Tsukuba Univ. Kagawa U.
 Deeply inspired by US’s NNIN (, RTB). Univ. of Tokyo Hiroshima U.
Yamaguchi U.
 Fields: Fabrication, Analysis, Chemical Waseda U.
Synthesis
TITechFAIS䝘䝜䝔䜽䝜䝻䝆䞊䞉䝥䝷䝑䝖䝣䜷䞊䝮䛆䠄䝘䝜䝥䝷䝑䝖䛾䝺䝌䞁䝕䞊䝖䝹䠄୕⏣⦅䠅䛇

Permanent
Professor

Nanotech
Network

Dean Secretaries

NanotechResearcher

NanotechTechnician

Kawasaki
BranchAdmin.
Management

Kaworu Watanabe䖪

Blank
Mask

Kimihiiko Hirosawa䖪

Yoshio Nakamura

Equipment
Maintenance,
Condition
tuningAyako Mizushima 䖪

Eric Lebrasseur䖪Part Time Student Assistants䖪

Student
Technician

Akio Higo

Part time
Administrator

Permanent
Engineer

Nanotech Field
Ph.D Students

Pr. Yoshio Mita

WEB

Ph.D
58
Students

Go
al

Frontend

ISESD 2018 MITA, Yoshio

Makoto Fujiwara 䖪
Tomoki Sawamura
Operation
Assista
Manuals
nce ofDevelopment,
User
Infrastructure
Users
MaintenanceEtsuko Ohta 䖪

Cleanroom
Management Le Duc Ainh

Pr. Shinobu Ohya

Noriko Kawai

Backend

Nanotech“pitch”supporters55ǁŝƚŚEĂŶŽƚĞĐŚ͘WůĂƚĨŽƌŵ

Agiledevelopmentin/ŶƚĞŐƌĂƚĞĚ Chemical
Sensors

ISESD 2018 MITA, Yoshio

57

Pros䠖Best match of pros of self
and proxy use.
Cons: Schedule constraint ofengineers.

Pros䠖More possibility tosuccess.
Cons䠖Must pay forengineer / User himself
cannot learn.

Pros䠖Skill up of user/ No time
constraint/cheap
Cons: Many failures before
getting accustomed.

User

NanotechEngineerTechnicalAssistanceUser tries for goal underassistance

User

NanotechEngineer

ProxyUse
Engineer tries for goal
Instead of User.

Goal

SelfUse
User operates and directly
Try for fabrication goal.

User

Nanotech Field

 YOU are the player on the “Nanotech pitch”

AccesstoVDECNanotech

Goal2017 MITA, Yoshioఱᗘ䛷䜒ኻᩋ䛷䛝䜛䟿Ṋ⏣䛾䛚䛛䛢䛷

⮬ศ䛷ヨ䛫䜛᭱኱䛾䝯䝸䝑䝖

Goal

139

140
Heater / Sensor
Photovoltaics

P N Junction

Metal andInsulator

Transistor

WiringResearcher B

Researcher A

Researcher N

VLSI
WafersISESD 2018 MITA, YoshiohCMOS Foundryrryy

Shared Design

 VLSI used as reliable p n junction devices

 Produce new Micro ELECTRO Mechanical Systems

Scenario䠐䠖VLSI wafer as MEMS baseplate

ISESD 2018 MITA, Yoshio

advantage䠖Reliability

Stress Sensor

Polysilicon

Diode

Use as MEMS
(diverted use)

Real
Structure

Use as LSI(as intended)

CMOS Device as MEMS Material

…
66

VDEC/
Takeda CR

64,6(6'0,7$<RVKLR

RQ62,ZDIHU

Intentionally “cut”
underneath

aspect ratio
more than 100( 500 m)OutͲofͲplane movement
ISESD2017.10.17 MITA,YoshioInͲplane movement

 Make Structure movable by removing underneath(Releasing) down to 1 m

 Deposition, Lithography and Etching Semiconductor Technology

67

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,VRODWLRQ/D\HU

MEMS Structure Fabrication

6WDQGDUG%XON9/6,

Silicon Substrate Tested SOI: 9, 25, 50 m (covers most of applications) Up to 20 additional wafers available (200k yens per wafer)

 Affordable: Base cost 3.5M yens

 CMOS Circuits on the user provided wafers (popͲrice scheme)

 6 inch wafer is obtained

 0.6 m, 5V Standard CMOS Technology 15mm full reticle

VDEC’sCMOSͲMEMS MultiͲChip Scheme

141

Device 1

ISESD 2018 MITA, Yoshio

PCB

MSA 500
Signal Gen.

MSA 500
LDV

VDRV

B

Device 1

68

CMOS as
PiezoresistancesensorMSA 500 microsystem analyzer(Signal Source + Laser Doppler Vibrometer70
and or Stroboscope)

ISESD 2018 MITA, Yoshio(Measurement inatomosphere)

IDRV

Permanent
MagnetDevice Directly Bonded on PCB

ChipPermanent
MagnetMagneticDriveExperiments

R. Setoguchi et.al, DTIP 2015

Post Process Layout

Device 2

Device 2

ResonantUͲshaped
BeamwithPiezoresistive Gauge

ISESD 2018 MITA, Yoshio

8μm wide electrical track
Post processed

1st mode
8540HzISESD 2018 MITA, Yoshio

2nd mode
17kHz
1st mode:translational

2nd mode:
torsional

 Vibration is converted to displacement in MSA 500
 Noise Floor = 260dbm = 0.1pm
 Background: 220dbm = 10pm

Exp #1:Nodrivingsignal

Device 1

SEMview

71

69

142

ISESD 2018 MITA, Yoshio

ISESD 2018 MITA, Yoshio

Drive signal is sinusoidal. The frequency was swept one by one.

LDVmeasurementresult(bis)

2mA
4mA
6mA
8mA
10mA

 Amplitude is proportional to applied current

74

72

73

ISESD 2018 MITA, Yoshio

75

The simplest theory of vibration with damping perfectly fit the result!!!

Fittingbytheoryofvibration.

ISESD 2018 MITA, Yoshio

 Image Reconstructed by LDV measurement Voltage applied: 50,100,150,200,250mV Yields 2,4,6,8,10mA approx. (R=25 )Vibrationat8540Hz

Exp #2:Withapermanentmagnet

143

76

ISESD 2018 MITA, Yoshio[μm]
Very beautiful linear relationship was measured.
78

Analysisofmovementandpiezooutput

ISESD 2018 MITA, Yoshio

Green line is theoretical fit.

Inlinearscale…

⚙

ISESD 2018 MITA, Yoshio

 Array of MEMS Sensing Elements+ Information Technology for Analysis
 Based on thesame CMOS MEMS platform with CNRS ENSI de Caen, France Dr. M.Denoual

77

84

New Material and
CMOS for Sensor
㰯(nose) Zeolite, Electronics, and Nanostructure 䠄ZEN NEZ䠅IntegratedChemicalSensor

ISESD 2018 MITA, Yoshio

Attention:: the green line in this figure is the real output of strain gauge!!!

Bridgeoutputmatchesperfectly

144
QP

ISESD 2018 MITA, Yoshio㼆㼑㼛㼘㼕㼠㼑㼟㻌㼕㼚㻌㻝㻌㽀㼙㻌㼣㼕㼐㼠㼔㻌㼠㼞㼑㼚㼏㼔㼑㼟

ISESD 2018 MITA, Yoshio

Mechanicalresonantgasdetector

1st generation:

homogenize the filling.

~1mm

85

87

~400 μm

 Nanotrenches structuration to enhance the ratio of zeolites and to Piezo resistive gauge and pre amplification

 Gas selectivity is ensured by zeolite coating.

 Resonant devices for gas sensing.

 Involving a french chemist laboratory (LCS CNRS ENSICAEN)

 Started in April 2015.

 2 years bilateral France Japan project funded by JSPS and CNRS.

IntegrationMaterial:Zeolite

b

a

QP

 ]HROLWHILOOLQJ KDUGPDVNUHPRYHG

ISESD 2018 MITA, Yoshio

Gas adsorption into zeolitepMass increasepResonant frequency decrease

Mechanical resonant gas sensor:

Laplace force88‫ܨ‬Ԧ ൌ ‫ܫ‬Ǥ ݈̰݀‫ܤ‬

Measurementof1st generation:86

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mass
Specific heat

FWK u 0ISESD 2018 MITA, Yoshio

92

90

Thermalconductance*WK

Realizationexamples:
micro/nanostructureforgassensor&WK

Thermal mass

Thermal time
constant

W WK

Thermal mass
(heat capacity)

ISESD 2018 MITA, Yoshio

Gas adsorption into zeolitepMass increasep
Thermal mass increasep
Thermal time constant increasepResonant frequency decrease

Thermal resonant gas sensor:

2nd gen:Thermalmassgassensor

ethanol$SULO)LUVW
LQWHJUDWLRQVWHS SUHDPSOISESD 2018 MITA, Yoshio)HE

3URWRW\SHGHWHFWLRQSULQFLSOH
GHPRQVWUDWLRQ

0D\

9391㻹㻲㻵㻌㻦㻌㼟㼑㼚㼟㼕㼠㼕㼢㼑㻌㼠㼛㻌㼑㼠㼔㼍㼚㼛㼘“Agile”deviceevolutioningas
sensorbilateralproject:

ISESD 2018 MITA, Yoshio㻯㼛㼙㼜㼍㼠㼕㼎㼘㼑㻌㼣㼕㼠㼔㻌㼠㼔㼑㻌㼜㼛㼟㼠㻙㼜㼞㼛㼏㼑㼟㼟㼕㼚㼓㻿㼑㼘㼑㼏㼠㼕㼢㼕㼠㼥㻌㼛㼒㻌㼦㼑㼛㼘㼕㼠㼑㻌㼔㼕㼓㼔㼘㼕㼓㼔㼠㼑㼐

watervapor㻟㻌㼠㼥㼜㼑㼟㻌㼛㼒㻌㼦㼑㼛㼘㼕㼠㼑㼟㻘㻌㻞㻌㼠㼍㼞㼓㼑㼠㻌㼏㼛㼙㼜㼛㼡㼚㼐㼟㻲㻭㼁㼄㻌㻦㻌㼟㼑㼚㼟㼕㼠㼕㼢㼑㻌㼠㼛㻌㼣㼍㼠㼑㼞Gascharacteristicsexperiment:

146

ISESD 2018 MITA, Yoshio

Pr. B. le Pioufle,
JSPS CNRS Bilateral 18 20

Next…

Dr. S.Smith, SMC/U.Edinburgh
D2T Invited Faculty, 16.05 09

Dr. M. Denoual ERE 13.04 09,
JSPS CNRS Bilateral 15 17

Dr. J. B. Pourciel
PICS (CNRS) 06 09
Dr. Y.Mita – Invited Professor
AYAME (JSPS INRIA) 09 11
Pr. J. Bourgeois , Dr. J.Malapert“SmartBlocks II” (ANR) 11 14“Programmable Matter” ANR16
Dr. A.Pinna, Pr. P. Garda
PEPS (CNRS) 12 14

Pr. T. Bourouina, Mr. F. Marty
PAI Sakura (Embassy of France) 03 06

CollaborationisGrowing!

ISESD 2018 MITA, Yoshio㻼㼕㼏㼠㼡㼞㼑㻌㼐㼡㼞㼕㼚㼓 㼠㼔㼑㻌㼜㼛㼟㼠㻙㼜㼞㼛㼏㼑㼟㼟

Micro/nanostructureforgassensor
developedin6monthseach.

102

YOU

94

QP

ISESD 2018 MITA, Yoshio

Dr. Denoual
Circuit design
Thermal Concept

LCS Pr.Mintova
Material syntheses

All based on unique CMOS MEMS platform at UTokyo VDEC OSFET: Odor Sensitive FET Odorant input, current output.

 New material Integrated MEMS sensor(2) ZEN:Zeolite, Electronics, and Nanostructure Resonant frequency shift prototype

 New material Integrated MEMS sensor(1) 0.35V/cell, 2.8mW/cm2 under AM1.5

 High Voltage Generating Photovoltaic

 2ͲSeries connected transistor to hold 2VDD
 20 series off transistor hold over 800V

 High Voltage Switching Circuit withStandard CMOSISESD 2018 MITA, Yoshio103'7HUXWVXNL,(((0(06 6,QRXH HWDO66'0

,0RUL HWDO66'0 

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VDEC Mita Lab
CMOS and MEMS design,
Nanotechnogy Platform

RCAST Tixier Mita Lab
Application to fluidic device

RealizedDeviceExamples

QP 2 research groups from UTokyo, 2 from ENSI de Caen

 Four partners brought their expertiseand collaborated closely.

SecretofQuickSuccess:147

2017 MITA, Yoshio ᩍ⫱䛻䜘䜛䛂ᖖ㆑䛾⩦ᚓ䛃 䜸䞊䝥䞁䝋䞊䝇άື䜢ཧ⪃䛻䛧䛯䛂▱㆑䛾䝛䝑䝖䝽䞊䜽໬䛃 䛂ᐇ⿦ᡭẁ䛃䛾኱⾗໬ 㞟✚໬MEMS 䛂⣲Ꮚ䛃䛾㧗ᗘ໬ 䝘䝜䝔䜽䝜䝻䝆䞊䞉䝥䝷䝑䝖䝣䜷䞊䝮 䛂ヨసᡭẁ䛃䜈䛾䜰䜽䝉䝇ᐜ᫆໬ MEMS䞉䝉䞁䝃⏺䛷䛾㉁ⓗኚ໬䛿䚸ྍ⬟䟿

䜎䛸䜑

104

ISESD 2018 MITA, Yoshio

105

Mail: mita@if.t.u tokyo.ac.jp

 Simultaneous development of device and application is the key to success.

 in Nanotechnology Platform Open Facility.

 using VLSI wafers as a reliable material, Conduct Agile Research with MEMS,

YesWeCan!

Biopharmaceutical Application of Nanotechnology-Development of Transdermal Vaccine（バイオ医薬品へのナノテクノロジーの応用−塗るワクチン開発−）
1, 2

1

M. Goto

Department of Applied Chemistry, Graduate School of Engineering, Kyushu University
744, Motooka, Nishi-ku, Fukuoka 819-0395, Japan
2

Center for Advanced Transdermal Drug Delivery Systems,
744, Motooka, Nishi-ku, Fukuoka 819-0395, Japan

Abstract,QWKHODVWWZRGHFDGHVGL൵HUHQWGUXJGHOLYHU\PHWKRGVKDYHHPHUJHGZLWKYDULRXVWDUJHWHGGHOLYHU\
URXWHV IRU LQVWDQFH WUDQVGHUPDO WRSLFDO RUDO LQMHFWLRQ DQG QDVDO$PRQJ WKH GLIIHUHQW URXWHV Dtransdermal drug delivery (TDD) method is considered as a safe and a non-invasive technique for drug
administration. TDD has attracted attention for several advantages over conventional oral or injection
URXWHVXFKDVE\SDVVLQJ¿UVWSDVVH൵HFWVDIHDQGSDLQOHVVURXWHHWFZKHUHDVWKHEDUULHUIXQFWLRQRIWKH
skin inhibits the drug delivery through the skin. My talk focuses on the TDD system that utilizes nanodrug
carriers. Transcutaneous immunization using the skin’s immune system is increasingly attracting attention.
In contrast to conventional immunization by injection, transcutaneous immunization requires only topicalapplication of antigens to the skin and is a simple, non-invasive method that does not require medical
personnel. However, the major problem is that the stratum corneum (SC) serves as a hydrophobic barrierat the skin surface.
To overcome the SC barrier and induce immunity, various
antigen formulations have been developed. Our approach is
to coat the antigens with hydrophobic surfactant molecules
XVLQJZDWHULQRLOHPXOVL¿FDWLRQIROORZHGE\IUHH]HGU\LQJ
to produce oil-dispersible antigen–surfactant complexes.
Because hydrophobic materials are more permeable
through the hydrophobic SC than hydrophilic materials,
oil dispersions of the complexes, namely solid-in-oil (S/O)
nanodispersions, can improve the delivery of antigens into
the skin. Using this S/O technique, we demonstrated antigenFigure 1. Nano technology has a high potential for
VSHFL¿FDQWLERG\SURGXFWLRQE\WUDQVFXWDQHRXVLPPXQL]DWLRQ pharmaceutical application1,2).
without physical enhancement or pre-treatment of skin.
In this lecture, we applied this nanodispersion technique to the induction of cancer immunity. Cancer
immunotherapy by activation of immune system against cancer has recently received attention for its
feasibility in the treatment of malignancies with little toxicity. The key step for inducing the cancer
immunity is the delivery of cancer-specific antigens to dendritic cells (DCs), followed by the antigenSUHVHQWLQJE\WKH'&V2XULQYHVWLJDWLRQUHYHDOHGWKHDELOLW\RIWKLVDSSURDFKWRLQGXFHDQWLJHQVSHFL¿F
cellular immune responses against cancer by evaluating the growth of OVA-bearing tumors and the
production of cytokines from splenocytes. Inhibition of tumor growth was achieved, demonstrating theapplicability of S/O nano carriers to the induction of cancer immunity. We will show you an example tocreate a novel vaccine by utiliziing nanotechnology.
References[1] M. Kitaoka, R. Wakabayashi, M. Goto, Biotechnology Journal., 11, 1375-1385 (2016).
[2] R. Wakabayashi, M. Sakuragi, S. Kozaka, Y. Tahara, N. Kamiya, M. Goto, Mol. Pharm., 15, 955–961 (2018).

148

Masahiro Goto,
Professor,
Director of Advanced Transdermal Drug Delivery System Center
Department of Applied Chemistry,
Graduate School of Engineering,
Kyushu University
Education:
B.S. Kyushu University (1984)
M.S. Kyushu University (1986)
PhD Kyushu University (1989)
Professional career:
JSPS fellow, Department of Synthesis Chemistry, Kyushu University, Japan, April 1989 to May 1990.
Associate Professor, Department of Applied Chemistry, Kyushu University, Japan, June 1990 to
October 2001.
Visiting Scientist, Department of Chemical Engineering, Massachusetts Institute of Technology (MIT),
USA, June 1994 to June 1995.
Professor, Department of Applied Chemistry, Kyushu University, Japan, November 2001 to Present.
Director, Center for Transdermal Drug Delivery Systems, Kyushu University, Japan, April 2013 to
Present.
Professional membership:
The Society of Chemical Engineers, Japan / The Society for Biotechnology, Japan /The Chemical Society of Japan / ACS / AIChE/
Chief Editor, Biochemical Engineering Journal (BEJ).
Honors and awards:
Young Researcher Award in 1991 from The Society of Chemical Engineers, Japan
Outstanding Research Award in 2005 from The Society of Chemical Engineers, Japan
6FLHQWL¿F3DSHU$ZDUGLQDQGIURP7KH6RFLHW\IRU%LRWHFKQRORJ\-DSDQBest Paper Award in 2013 from The Society of Chemical Engineers, Japan
Research projects:
Pharmaceutical engineering for immunization
Drug delivery systems (DDS) for cancer and allergy treatment
Pharmaceutical application of ionic liquids
Number of original papers: 511, Number of citations:13408, h-index:61
Number of reviews and books: 113, Number of patens: 82
From Google Scholar: Masahiro Goto, Kyushu University
https://scholar.google.co.jp/citations?user=J7DGmVkAAAAJ&hl=ja&oi=ao

149

150

Scale bar : 100 nm

After coating with Surfactants

S/O nano carrier

In Isooctane

Masahiro Goto,

TDDS center

Kyushuy
University

In water㸦ࣂ࢖࢜་⸆ရ࡬ࡢࢼࣀࢸࢡࣀࣟࢪ࣮ࡢᛂ⏝࣮ሬࡿ࣡ࢡࢳࣥ㛤Ⓨ࣮㸧-Development of Transdermal Vaccine-

Biopharmaceutical Application of
Nanotechnology



IPM

L195

ER290
Solubilization by S/OO170

A novel formulation of a hydrophilic drug
encapsulated in solid-in-oil (S/0)
nanodispersion

Solidd- n-Oil(S/O)
d-in- () nanoo carrier,which is a nanoo-sizecapsulep
to dissolve bio
o-drugs- g
in an organic solvent
JP Patent No.4426749
㻞

151

0

5

10

15

20

25

30

35

40

0

400

600

800

The diameter of complexes [nm]200

The average diameter : 72 nm

1000

Protein drugs will be digested in our stomach
as well as proteins of meats and fish.

such a drug is a protein drug.

The answer is because

although everybody does not like it.

Why do we need the injection method

The size distribution of S/O nanodispersions

Frequency [%]䠏. Transdermal (through the skin)䠎. Injection

䠍. OralAdministration routes of drugs

Bos et al., Exp. Dermatol. 9 ί2000ὸ 165–169.

㻝㻝Surfact
Surfactant
facactantant

Oilil p
O
phase
hase

FITC-insulin
䠄6 kDa䠅SC removed
Skin

FITC-insulin
䠄6 kDa䠅Intact skin㻿㼠㼞㼛㼚㼓㼓 㼎㼍㼞㼞㼕㼑㼞 㼛㼒 㻿㻯

0

8

ProteinsP
roteins

Unstable
UnstabUn s ta
ab
ble
b
le
Large
L
arge size
size

32

Normal skin
16
24
Time [h]WaterWater p
phase
hase

20

40

60

Stripped
edd-skin80 Int. J. Pharm., 43 ί1988ὸ 31-40.
Nicorandil permeated[mg/cm2]

152

153

N
H

NH2

O

H
N

O

N
H

O
HO

H
N

Hydrophilic sequence

NH2

H 2N

O

NH2

O

N
H

O

H
N

O

OH

O

OH O
H
N

N
H

O

H
N

O

TRP-2 sequence

N
H

O

N
H
O

H
N

NH
O
OH

䃺 Solubility to water is low.

Tyrosinase-related protein-2 residues 180-188

8

Material

Antigen: TRP-2 (180-188)

Hydrophilic amino acid was introduced into TRP-2 sequence.

Antigen: K-TRP-2

Mellman I., et al., Nature, 480, 480-489 (2011)

Curative effect by immunotherapy

Resistant forchemotherapy

Melanoma

Material of S/O

Solid
lid-iinn-Oil (S/O)

S/O

6ROLGLQ2LO‫ق‬62‫ك‬
‫ق‬6
6 2

H

H

HO OH

H

HOC
OCH2

OH

H

O
H

O

OH

H

HOCH2

S rf
Su
Surfactant
rfa
acta
acta
ac
tant
ntt

Ol
Oi
Oil

O

H

H

HO CH2OH

+

S/O

H

CH3(CH2)11

Protein
P
Pr
otei
ot
o
en
ei

C

C
H

(CH2)11COOH

CH3(CH2)12

O

C

CH3

O H CH3C

Precipitated
Precipitatedciip
piittated H
Highlyighly
ghly dispersed
dispersed (~200( 200 nm)n m)

NativeQP



O

O

OH

O

O

O

OH

O
O
HO

O

O

FITC-TRP
S/O

FITC-TRP
solution

Penetration of TRP

OH
OH

O

Bars : 50 μm

0

10

20

30

40

50

60

70

80

90

0

19

The depth of the skin (μm)

50

Solution

S/O

100

Result & Discussion
Image analysis

Biological safety

Hydrophobic

Antigen: K-TRP-2

䃺 Solubility to water is low.

Tyrosinase-related protein-2 residues 180-188

18

Material

Antigen: TRP-2 (180-188)

Transcutaneous absorption
enhancing effectSurfuctant: L-195 laurate of sucroseO

Oil: IPM isopropyl myristate

Mellman I., et al., Nature, 480, 480-489 (2011)

Curative effect by immunotherapy

Resistant forchemotherapy

Melanoma

Material of S/OIntensity

154
PDI
0.185 – 0.297
0.171 – 0.293
0.179 – 0.347

102  497  7113  50 week
1 week
4 week19

Particle size[nm]Particle size and PDI (n=3)

S/O formulation is very stable.

The particle diameter hardly changed in 4 weeks.

Stability test

155

N

0

500

1000

0

N

N

1500

H 2N

5

Days

‫ ٻ‬R-848 S/O‫ ٷ‬S/O‫ ٹ‬Injection

10(MW: 314.4)‫ ٴ‬UntreatedOH

O

R-848 (Resiquimod)

15

In Vivo ExperimentDC

antigenpresentation

antigen of cancer

Dendritic Cell : DC

Strengthenn ththee immunimmunenesystem against cancer

Tumor volume [mm3]

S/O

0

3

6

9

R-848

Cancer
cell

S/O

R-848
S/O

R-848 S/O

Control Injection

T cellTarget䟿

Kill

28

21

9 Effectiveness to metastatic cancer

TRP

-14

-7

<Schedule of experiment>
Transdermal
immunization Day
Day䞉TRP-S/O 䞉䞉䞉TRP 200 μg /mouse+ Adjuvant䞉Injection 䞉䞉䞉TRP 200 μg /mouse

9 Long effect䞉TRP-S/O. 䞉䞉䞉TRP 200 μg /mouse

䞉Control 䞉䞉䞉No treatment<Administration>Day
0

Inoculation ofcancer cells

Immunizationby using patch

Transdermal cancer immunity

9 Little side effect

Advantage

Cancer immunotherapy and Dendritic cell

Nodules/Lung

TRP

Measuringtumor-volume

C57BL/6N mice

22

Organazing Committee
Shigeo Tanuma (Chair)

National Institute for Materials Science

Yasuo Koide
Hidetoshi Kotera

National Institute for Materials Science
RIKEN

Nobuo Tanaka
Yoshinobu Baba

Nagoya University
Nagoya University

Daisuke Fujita
Toshihiko Yokoyama

National Institute for Materials Science
Institute for Molecular Science

Program Committee
Shigeo Tanuma (Chair)

National Institute for Materials Science

Masahiro Goto
Nobuo Tanaka

Kyushu University
Nagoya University

Tetsuji Noda
Nobutaka Hanagata

National Institute for Materials Science
National Institute for Materials Science

Yoshinobu Baba
Takeshi Fukuma
Yasufumi Fujiwara

Nagoya University
Kanazawa University
Osaka University

Cooperating Organizations
IEEE Tokyo Section,
The Japan Society of Applied Physics
The Society of Polymer Science, Japan,
The Institute of Electrical Engineers of Japan,
The Institute of Electronics, Information and Communication Engineers,
The Society of Nano Science and Technology,
Nanotechnology Business Creation Initiative,
The Materials Research Society of Japan,
The Chemical Society of Japan,
The Japan Institute of Metals and Materials,
The Japanese Society of Microscopy,
The Japanese Society for Regenerative Medicine
The Society of Materials Science, Japan,
Japanese Society for Artificial Organs,
Japanese Society for Medical and Biological Engineering,
The Ceramic Society of japan,
The Japan Society of Drug Delivery System,
Japanese Society for Biomaterials,
The Japan Society of Vacuum and Surface Science,
The Physical Society of Japan156

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