2015 Annual Meeting of The Institute of Electrostatics JapanTokyo Metropolitan University
September 24-25, 2015

24pC-1
September 24th (Thu.), <15:45-17:45>
Room 3A study on Verification of Impurity Density Spatial
Distribution in Silicon Wafer through Surface Potential
Measurement with Electrostatic Force Microscope
Daichi Satou*，Haruyuki Miyano***，○Hiroaki Takatsu*，Jumpei Higashio**，
Toshio Uehara**，Yoshihiro Takahashi***，Yoshito Ashizawa***，ArataTsukamoto***，Katsuji Nakagawa***
Nihon University* ***，Trek Japan Co.,Ltd**

Abstract:
Electrostatic force microscope (EFM) we developed can measure
voltage on surface (VS) up to 1 kV in air with extremely high sensitivity (~20 mV)
as well as high spatial resolution (~10 μm). We applied the EFM to measure
impurity distribution. It is revealed that the measured VS showed opposite
voltage polarity depending on n- or p-type dopant. The VS should correspondwork function difference between sensor metal and Si substrate to keep
flat-band condition of Si substrate. We observed density distribution of impurities
with EFM by this method, and discussed the results.

2015 Annual Meeting of The Institute of Electrostatics JapanTokyo Metropolitan University
September 24-25, 2015

24pC-2September 24th (Thu.), <15:45-17:45>
Room 3

Study on N2 plasma processing to TiO２Photocatalyst○Shota YAZAWA, Kiyozumi NIIZUMA, Yusuke KUDO
College of Industrial Technology, Nihon University

Abstract:
A photocatalyst is attracting widespread attention because it works
semipermanently under light irradiation. A photocatalyst has usefulcharacteristics such as an oxidative decomposition and a super-hydrophilicity.
However, TiO2 photocatalysts which are often used can be activated only byultraviolet rays. The ultraviolet rays for photoactivation of TiO2 are included
nearly zero in indoor lights. If a photocatalyst can be activated with visible light
as well as ultraviolet light, a photocatalyst can be used not only outdoors but alsoindoors. N-doped TiO2 is one of visible light responsible photocatalysts. We tried
to produce N-doped TiO2 with N2-plasma processing. We have focused on thesample temperature under an N2-plasma processing. In this study, the N2plasma processing time to TiO2 was changed.

2015 Annual Meeting of The Institute of Electrostatics JapanTokyo Metropolitan University
September 24-25, 2015

24pC-3September 24th (Thu.), <15:45-17:45>
Room 3

Improvements of 150 .C annealing technique fordye-sensitized solar cells
Shungo Zen
The University of Tokyo Department of Advanced Energy

Abstract:
Dye-sensitized solar cells (DSSCs) require annealing of TiO2
photoelectrodes at 450C to 550C. However, high-temperature annealing isunfavorable because it limits the use of materials that cannot withstand hightemperatures. In previous papers, we proposed a 150C annealing technique ofTiO2 photoelectrodes to reduce the annealing temperature from 450C to 150C
using a conventional TiO2 paste that contains organic binders. Using ourtechnique, η of 4-μm-thick TiO2 film is achieved approximately 110% comparedwith that of 500C annealing and η of 11-μm-thick TiO2 film DSSCs is lower thanthat of500C annealed.
In this paper, we improve the 150C annealing technique by heating
Dielectric Barrier Discharge (DBD) treatment device.

2015 Annual Meeting of The Institute of Electrostatics JapanTokyo Metropolitan University
September 24-25, 2015

24pC-4September 24th (Thu.), <15:45-17:45>
Room 3Synthesis and Shear Piezoelectricity of Optically Active
Polysuccinimide.
〇Kazuhiro TANIMOTO*,**, Shota SAIHARA*, Yu ADACHI*, Yuhei HARADA*
and Yoshiro TAJITSU**Graduate School of Engineering, Kansai University **Mitsui Chemicals, Inc.

Abstract:
Optically active crystalline polymers show shear piezoelectricity due totheir asymmetric crystal structure. Polysuccinimide (PSI) is minimum structure ofan optically active polyimide and we reported that optically active PSI shows
shear piezoelectricity. In this study, we synthesized optically active
polysuccinimides (PSI) and evaluated their shear piezoelectricity. As a result, themaximum value of shear piezoelectric d constant was 1.56 pC/N. This value ishigher than many biopolymers and polypeptides.

2015 Annual Meeting of The Institute of Electrostatics JapanTokyo Metropolitan University
September 24-25, 2015

24pC-5September 24th (Thu.), <15:45-17:45>
Room 3

Numerical Analysis on Body Force Characteristic ofDual-Grounded Tri-Electrode Plasma Actuator〇Asa Nakano, Hiroyuki Nishida, Masaki Tamura
Tokyo University of Agriculture and TechnologyAbstract:
In this research, we focus on dielectric barrier discharge plasma actuator(DBDPA).
DBDPA is an active flow control device and when high frequency ACvoltage is applied to it, it generates body force brings in inducted flow. However,this induced flow is too weak to install on aerodynamic bodies in a high-speed
flow so we have suggested Dual-Grounded Tri-Electrode plasma actuator(DGTEPA) which makes stronger thrust with higher efficiency. In this study, wecompare the body force of DBDPA and DGTEPA for different applied voltage bya plasma simulation. First it is confirmed that the simulation results are inqualitatively agreement with the experiments from the viewpoint of plasma
distribution. Next we discuss the voltage characteristics of the body force andbody force - power ratio. As a result of simulation, we found DGTEPA has
smaller time averaged body force with worse efficiency than DBDPA. Although
the quantitative discrepancy exists, it is expected that the simulation canreproduce the qualitative trends.

2015 Annual Meeting of The Institute of Electrostatics JapanTokyo Metropolitan University
September 24-25, 201524pC-6
September 24th (Thu.), <15:45-17:45>
Room 3

Production of a shock wave by a nanosecond-pulse
discharge and the effects on the flow control○Atsushi Komuro, Shuto Matsuyuki, Kaiki Konno, Kazunori Takahashi, Akira
Ando
Tohoku University

Abstract:
Flow control technique driven by the nanoseconds-pulse discharge wasinvestigated. As a fundamental experiment, we observed a shock wave
generated by the nanoseconds-pulse discharge by the schlieren visualization. A
complex pattern of quasi-planar and spherical compression waves wasobserved. From the schlieren imaging, shock wave intensity was evaluated withits contrast. The results showed that shock wave intensity increases as a pulse
peak voltage increases and a rising time is lengthened.

2015 Annual Meeting of The Institute of Electrostatics JapanTokyo Metropolitan University
September 24-25, 2015

24pC-7
September 24th (Thu.), <15:45-17:45>
Room 3

Experimental Estimation of Electrohydrodynamic ForceonDBD Plasma Actuator and Its Validation
Hiroyuki Nishida
Tokyo University of Agriculture and Technology

Abstract:
To experimentally estimate the EHD force field generated by a DBDplasma actuator (DBDPA) using PIV measurement, some techniques have been
proposed by several researchers. In those methods, the EHD force is estimatedbased on the Navier-Stokes equations under some assumptions.
Because of the assumptions, it is important to validate the result. In thisstudy, the EHD force field is estimated by three different methods, and thecomparison of these results is conducted. From the viewpoint of thetime-averaged body force field, the result with the assumption of quasi-steadybody force is different from other results with neglecting the pressure gradient orthe vertical EHD force. From the view point of the time-varying body force, theresults under the assumption of no-pressure gradient and no-vertical EHD force
are similar. However both results have some estimation errors; a negative bodyforce appears during no-discharge period.