GPS Safety Summary Reference No.: JIPS_MSP_GS‐1111

SHOWA DENKO K.K.

GPS/JIPS Safety Summary
1. SUBSTANCE NAME
Pentafluoroethane (CAS No.: 354-33-6)
2. GENERAL STATEMENT
Under normal temperatures, pentafluoroethane is a stable, clear, odorless, non-flammablegas that has been specified as a greenhouse gas. When handling the gas, it is necessary to
exercise caution in regard to oxygen deficiency and high-pressure gas.
Our high-quality pentafluoroethane is suitable for use in semiconductor manufacturing
processes, as an etching gas.
3. CHEMICAL IDENTITYItem
Chemical or genericname
Product name
CAS No.
Other Nos.
Chemical formula
Structural formula
Sources/references

Description
PentafluoroethaneHigh Purity HFC-125354-33-6
Japan: Chemical Substances Control Law (2)-3713
EC No. EINECS No: 206-557-8
CHF2CF3

Sections 3 and 16 of the SDS issued by SHOWA DENKO K.K.

4. USES AND APPLICATIONS
Main uses

Our pentafluoroethane is used for an etching gas as a high-quality
gas for producing semiconductors. Other applications ofpentafluoroethane include a refrigerant agent.

5. PHYSICAL/CHEMICAL PROPERTIES
Pentafluoroethane takes form of a clear gas under normal temperatures and pressures.
AppearanceGasColor
Colorless
Odor
Odorless
Boiling point-48.5ºC
Flammability
Non-combustible
Auto-ignition
No reliable datatemperature

GPS Safety Summary Reference No.: JIPS_MSP_GS‐1111

Vapor pressure
Vapor density
Solubility in water
Partition coefficient(n-octanol/water)
Sources/references

1.380MPa (25 ºC)
4.2(Air=1)
0.5g/100g (37.8ºC)
LogPow=1.48
Section 9 of the SDS issued by SHOWA DENKO K.K.

6. HEALTH EFFECTS

Effect assessment
Acute toxicity (oral)
Acute toxicity (dermal)Acute toxicity (Inhalation : gases)
Acute toxicity (Inhalation : vapors)
Acute toxicity (Inhalation : dusts and mists)
Skin corrosion/irritation
Serious eye damage/eye irritation
Respiratory sensitization
Germ cell mutagenicity
Carcinogenicity
Reproductive toxicity
Specific target organ toxicity (single exposure)Specific target organ toxicity (repeatedexposure)
Aspiration hazard
Sources/references

Results (GHS(Note 1) hazard classification)
Classification not possible (Note 2)Classification not possible
Not classified (Note 3)
Not applicable (Note 4)
Not applicable
Classification not possible
Classification not possible
Classification not possible
Not classified
Classification not possible
Classification not possible
Classification not possible
Not classified

Not applicable
Sections 2, 11 of the SDS issued by SHOWADENKO K. K.
(Note 1) GHS (Globally Harmonized System of Classification and Labeling of Chemicals): It
is a system for classifying chemicals according to type and hazard level, and for indicatinglabel information pursuant to the globally unified rules for offering Safety Data Sheets.
(Note 2) Classification not possible: when unable to classify due to a lack of sufficiently
reliable data for defining the classification.
(Note 3) Not classified: when the hazards are believed to be less than even the lowest hazard
classification defined in the GHS.
(Note 4) Not applicable: when chemicals do not fall within the scope of classification because
the physical properties defined in the GHS do not apply.

7. ENVIRONMENTAL EFFECTS
Effect assessment
Hazardous to the aquatic environment
Acute hazard
Long-term hazard
Hazardous to the ozone layer
Sources/references

Results (GHS hazard classification)
Not classified
Not classified
Montreal Protocol on Substances that
Deplete the Ozone Layer (revised version):
not included in the list
Sections 2 of the SDS issued by SHOWADENKO K.K.
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GPS Safety Summary Reference No.: JIPS_MSP_GS‐1111

Environmental
fate/dynamics
Mobility in soil
Persistence/degradability
Bioaccumulation
potential
Conclusion about
PBT/vPvB

Other
Sources/references

Results
No reliable data available.
It is presumed that there is no biodegradable.
It is presumed that there is no bioaccumulation.
The criteria for persistent bioaccumulative and toxic (PBT;
remaining persistently in the environment and possessing highbioaccumulation potential and toxicity) and very persistent andvery bioaccumulative (vPvB; remaining very persistently in theenvironment and possessing very high bioaccumulation potential)
chemicals are believed to inapplicable.
Emissions of gas affecting global warming. Global warningpotential (GWP 100years): 2,800(Legal value)
Section 12 of the SDS issued by SHOWA DENKO K.K.

8. EXPOSURE

Occupational
exposuresConsumer
exposures
Environmental
exposures

Precautions

Exposure potentials through main uses
Since the company’s product is produced in a closed process, thepotential for occupational exposure is extremely limited. However,workers could inhale the substance, or their skin and eyes could come indirect contact with it when sampling, etc.
The substance is not used in any case by general consumers.
Since the substance is normally manufactured and used in a closed
process, its emission into the environment is extremely limited.
The substance exists in the form of gas under normal temperatures andpressures, and is believed to be dispersed in the air when discharged into
the environment. Further, the substance could be promptly decomposedin the air.
If there is the potential for exposure during use in other applications,please implement appropriate measures by referring to the risk
management recommendations.

9. RISK MANAGEMENT RECOMMENDATIONS

Occupational
exposures

Risk management recommendations
Technical measures
・Install a wash stand, eye washer and safety shower at places that
manufacture, store or handle the product. Additionally, when handlingthe substance, implement the following technical measures.
Local exhaust and total ventilation
・Install local exhaust or total ventilation systems at places where theproduct is manufactured, stored or handled. Additionally, maintainappropriate air concentration levels.
Protective equipment
While working, wear appropriate protective eyewears, air-supplied
respirators, clothes and protective gloves made of materials
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GPS Safety Summary Reference No.: JIPS_MSP_GS‐1111

Consumer
exposures

impermeable to pentafluoroethane.
Precautions
・Managers responsible for processes should educate workers on theselection of appropriate protective gear, their proper usage and how tomanage their working places.
Normally, general consumers would not use the substance. However if itis used, implement risk-management measures similar to thoseindicated in “Occupational Exposures” above.

Environmental
exposures

In order to prevent environmental exposures, implement preventive
measures against leakage into the atmosphere, for instance, treatmentof the used gases containing pentafluoroethane with an exhaust gas
treatment facility, and also pay attention to the daily management andhandling of the substance.

Specialinstructions(emergency
measures at timesof leakage, etc.)
Sources/references

In the event of leakage, make certain to wear protective gear and deal
with it appropriately. Abide by the relevant acts and regulations when
disposing the collected substance.
Sections 6, 7, 8, and 13 of the SDS issued by SHOWA DENKO K.K.

10. STATE AGENCY REVIEW
Hazard assessment
International ChemicalSafety Cards

Situations of review
no data

11. REGULATORY INFORMATION/ GHS CLASSIFICATION-LABELING INFORMATION
Regulatory information only in Japan
Applicable laws
Regulatory situations
Foreign Exchange and・Item (2), Appended Table 1-16 of Export Trade Control Order
Foreign Trade Act
Act on Port Regulations
Hazardous substances・Compressed gas , Article 21-2 of theAct, Article 12 of Enforcement Regulations
Civil Aeronautics Act
Pressurized gases, Appended Table 1 specifying thehazardous substances, Article 194 of the EnforcementRegulations
High Pressure Gas Safety ・Liquefied gas, Article 2-1 of the Act
Act・Non-flammable gas, Article 2-4 of Regulations for Safety
Precautions for High-Pressure Gas
Ship Safety Act
High Pressure gas, Appended Table 1 specifying thehazardous substances, Article 3 of Regulations for theCarriage and Storage of Dangerous Goods in Ship
Road Act・Restrictions on vehicle traffic, Article 19-13 of theEnforcement Ordinance, Appended Table 2 of Notification
No.12 of Japan Expressway Holding and Debt Repayment
AgencyAct on Promotion of Global Greenhouse Gases, paragraph 3-4, Article 2 of the Act, Article
Warming Countermeasures 1-6 of the Enforcement Ordinance
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GPS Safety Summary Reference No.: JIPS_MSP_GS‐1111

Act on Prohibition ofChemical Weapons andControl
UN classification
UN No.

Special organic chemical substance, Article 29-2 of the Act,
Article 4-3 of the Enforcement OrdinanceClass 2.2
UN3220

GHS classification, label information
Hazards
Physical chemical hazards
Flammable gases
Oxidizing gases
Gases under Pressure
Health hazards
Acute toxicity (Inhalation : gases)
Germ cell mutagenicity
Specific target organ toxicity(repeated exposure)
Hazardous to the aquatic environment
Acute hazard
Long-term hazard
GHS label elements
Pictogram or symbol

Signal word
Hazard statement

Classification results (hazard information)
Not classified
Not classified
Low Pressure liquefied gas
Not classified
Not classified
Not classified
Not classified
Not classified

Warning
Contains gas under pressure; may explode if heated.

12. CONTACT INFORMATION
Company name
Address
Department
Telephone, fax

SHOWA DENKO K.K.
Muza Kawasaki Central Tower 23rd floor, 1310 Omiya-cho,Saiwai-ku, Kawasaki, Kanagawa, Japan
Fine Products Group, Electronic Chemicals Division+81-44-520-1362/+81-44-520-1366

13. DATE OF ISSUE AND REVISION, ADDITIONAL INFORMATION
Date of issue: December 17, 2013
Revisions:
Date of revision
Revisedsection

Revised item

VersionSpecial instructions: none

14. DISCLAIMER
This Safety Summary which is a translation of original Safety Summary prepared inJapanese, has been prepared as a part of the efforts by GPS/JIPS: Japan Initiative of ProductStewardship by the chemical industry. This Safety Summary is meant to provide an outline ofPage 5/6

GPS Safety Summary Reference No.: JIPS_MSP_GS‐1111

information related to the safe handling of the subject substance rather than provide expert
information regarding the risk assessment processes, the effect on human health or theenvironment, etc. Moreover it is not a replacement for the Safety Data Sheet (SDS), theChemical Safety Report (CSR), or other risk assessment documents. To the greatest extent
possible, the Safety Summary contains accurate statements based on laws, materials,
information and other data available at the time of issue. However, it does not cover all suchdata. Additionally, it does not intend to provide a guarantee in any way.

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