!"#$%&'()*+,-./012345!
! ! ! ! ! ! ! ! ! ! ! ! ! ! ! ! ! ! ! ! 6789:;<=>?:@ABC:DEFG!
! ! ! ! ! ! ! ! ! ! ! ! ! ! ! ! ! ! ! ! ! ! ! ! !H"I"IJKILMJ!
NOP QR '!
+,P12STUVWXYZU[3\]*S:^*_``abcd_`efeg10 h 53
ijklm3!"#$%&nopfqrgP2stu3+,-./012'vXY[w!
fxePyz{\]|[:}U~•45PT€|[S:Dx•‚Y\#ƒ„…†‡€ˆ‰Š‹Œ3S•|V3Ž•|[wg!
! 12•‘3:#$%&nop3no’3“”s'P•–PT—:˜™\Pqr3#$%&nopkš'›45STUœ•'žŸY[w¡¢£¢ "#$¤¥¦_§% 3 &¨" ©ªS«¬

Y[w!

-€-•Sˆ:‘e®¯:nop3°±²³(•V-[h':´$#ƒ#ƒµ¶·¸'¹ºY[»p²¼$†½ƒ·‹¾•U¿VSžÀ-[w¼$†½ƒ·‹¾•UÁÂP¼$†½ƒ·Ã3ÄÅ¸S"ÆÇ'(UZÈ/'Éa¦¦ÊYZU[w¿YP´$#ƒ#ƒµ¶·¸SÉa¦¦ÈS|ZU*Ž'ËÌ-ZU*w¿3Ž€ˆ#ƒµ¶·²ÍÎ-ZU*ÏÐÑ…ÒªÓ©Ôª\m
Õ

YZU*¼Ô&Ö345S×ØY[w¼Ô&3ÙÚ3ÛÜ:ÝÞßàáâà3©ÔªãY²äå)[wNâà€ˆ•)_`¦¦æN`¦¦3çèS_éäU•Y[S:ê3ßàPë¯

Sì|ZU*›33íîPï[YZU[w!
#$%&nopPðñ°±3 &'" ÇÈ'(UZ3#ƒµ¶·òó¸3ôÈPN¦¦õös\]÷"ÆÇ{\3a¦¦3ôÈP¼Ô&øù'ú"•†Ôû·3üýS×Ø

Y*w!

! ! ¿¿\P¼Ô&3þÿ3!"²{#'$345:ËÌ(œ¯%&Õ''åUZ()Œ*w !

3 4 56!

* 1: ! "# $% & n o p!

f 2-=!

>g* ( S!"#$%&nop²+ŒS:$3¼Ô&P )*+,-*./01! V! 2,0$*.01! 3 3 ,-3 &455*+/!
67897+:! €ˆ.÷/|ZU*w ! ¿3¼Ô&30/P ;*85+7::,*.! &5+,.$! 'œ÷É_t†$
31\2

YZU*3456'7÷8)ˆYZ(÷:;7./7+!/7+8,.01! ²ÍÙV-[û9…:;<²-ZU*w!

_O© Ôª ?3ë¯ãY !
?3;<PÏÐÑ…Òª©ÔªfFíNNGHIcJ¦¦gV KL MNòó²OP'QRN_STUVWXY-ZZ['MN\Ô$:²Y)[]a`^3?\Nå3_`\]÷#ƒµ¶·€ˆaƒªb\è[c]a¦\]*w!
ÝÞßàP$3Nå3_`3\Ô$:'PRdbY[Ze:-€›Zaƒªffƒªò`¸g'gUh¸!

ßàV•|Z(÷:12'œ*‚Y\´$#ƒ#ƒµ@“NOÝÞ-[©Ôªm3¼Ô& ¶·¸SÈi-[haƒª[h¸S¡|jˆYZá!
ßàÝÞ'G|[›3VklˆY*wÝÞßàV¼Ô&;<V3mnPb•P|¢÷VP-ZU•Uw !
ë¯ãY[©Ôª3oõPpRZë¯ãY[©ÔªSFÖq¯‹•Uœ•'Œ*Vrh'?Sst•UŽ²˜•V-[wf·µ39$u²våã÷'Z©Ôª¸i'•*•)wYŒ*œ•'7÷8)[w!
@“_OA%B{3¼Ô&!

!

x3¼·´…†'yZU*wxz$3SPòÆ•'W{ƒ†V•|ZU*w !
@ “ N|_P©Ôª?3ë¯ãYVA%B{3@“²c O #$ ÒÇ 1•–'œ*´$#ƒ#ƒµ¶·¸C3DE+Œw!

ÝÞßà < ßà3•t:}~3ÝÞ3# $Ò Ç1 ’ 3 “ Rf ” • ¤ Šg02468

Ç1 DOWN=

126:12•‘:%&Ë†‘V‡
š›

3(mm)

D E S–'•|11mm„[ÈS|[ƒ µ ¶ · ¸ 3 ô È DE² * _ ' +Y[#$Ò©ªÇ•–'œ*#Œw126'()*:$3ôÈˆP`
Ç1 DOWN?=(>=(3DESƒ3œ•'•|ZU*€²„…-[w!

"!
=!

´$#ƒ#ƒµ¶·¸C3!
=@!
=

ôR\•U:©Ôª?ë¯ãYS•€'•‚•3\:\#$ÒÇ1•–'œ*>C!

‰tkg¤Š3Ç1•–'Ë-Z:N—126mm ös\]|[S:12•‘'Pa˜ 2 -=>õ–Ë†mm õ'›‹-:#$ÒÇSC—•*‘VôÈˆSŒ•'"¢—•*Ž•f©

™12•‘* _O´ $# ƒ #ƒ µ¶ · C© ªÇ 'œ * DEªÇ•6kg¤cm2-GgS‡„
3#$Ò‘Y[w!
b[rh'„…

Y[ªœ9$u=>3•¯„…P¿3#ƒµ¶·¸3ôÈ3žŸV0-:©ªÇ•6kg¤cm2-G '(UZ=>3•¯S¡b|[Ž²+-[w¿3=>»ù¢c3ÁÂP£ÀYZU•Uw©Ôª?32-=>²_t†$€ˆ_†$¤õ—-:rh'´$#ƒ#ƒµ¶·²¥C (A3 †$31\:¦…V²ÃUZ2-hŠ[ÛÜ:$3Ç1DEPÉcmm b\«%Œ
*¿VS‹¾[S§'P¨ˆ•€|[w$3*_'+-Z]*Ë†‘3Ç1DE\P#$Ò©ªÇ•6kg¤cm2-G \3Œ••©ÈPª«- [œ•'äl*w
3mm 3´$#ƒ#ƒµ¶·¸3ôÈP•("¢US#ƒµ¶·¸»p3¼$†½ƒ·P¼$†½ƒ·ÃÑƒ¬ƒÅ3-®²"¢—-:¯Ñ°ƒ#ƒ3`º²®þ±Œ*Ž\ËÌ3ù\]*VžŸY[3\²ƒ&²#$%&nopÖ®¯ðŒŽ²³Ÿ-[wGO²ƒ&3®þ±¼Ô&3oAÓþ±S´X÷:$3CCg² 6kg¤cm2-G`ºS…b|[3\:noµ3C fª†9…Ïƒ33 SF6 ©ªÇ3›V\¹…

"ÆÇ'(UZ¶·¸œ÷c¦¦h'þ±Y[²ƒ&3Cf¶·¸g'º—[R'Y[w#$%&nop3²ƒ&ì¹º3²ƒ&»P

nop‹-€ˆá`¼i½ò¾¿À3²ƒ&»V0Œ*œ•'¹…-[S:$3»Pì¹º²;.Œ*»pf2 å3Áò triple! Q! Ñ$Âg3þ±S¥Ã'ÄÅœ•'…R[wÐ Æ$Ç‡\P$3È3"É•©Èfa‰10 mmgS‡„

Y[S:¥Ã3<•-\ Cs ªÏ…#ÐÆ$ÇfSNICS
Êg€ˆ3²ƒ&S#$%&ì÷-b\"É•½ªT—ËÌ

Y*œ•':ÍV

-Zª9…†º3þ±²³|[w$3Û
Ü:á`¼‹-ª9…†¸'(UZ:Iýyz²Î³Œ*•l\:Ïi•²ƒ&ˆSÐˆY[w@“cO#$%&nopêŒ%&Õ'b[#$%&nop3CòÇ3üýP
noµ²"ÆÖÑeÀÒ-[¿V'œ*“”3Ó–'œ*øùÔ–S#Õ

Y[w!"3#$%&nopPÖC“”s3noµ²CòÇüý3[R3V×ÓUÐ$†V-Z(÷:noµ€š3©ª‹-:#ƒµ¶·¸3C“”s3ØÎS¢3ç\]*w$3[R'!"\ÙüY[ÚÛfƒÒÜòÝ [1]'œ*noµ3nÞßKS³XY[wà«$3ßKPaƒªV´$#ƒ#ƒµ¶·À3a¦]3ZáÐânoµ'[U-Z:0.1torr ös3ÚÛ©ªÈ\©ª²ã-•SˆfƒÒ©ªÜòf 1000 V:10 A:10äWgSGhÀÊå£)ˆY[w¿3ßK'œ÷:noµ“”PNe‘'PN` §áTorr 6'‹-[w´$#ƒ#ƒµ¶·'¹ºY[_63ÐÆ$U$œ3«%Púå\]*S:#ƒµ¶·æç$=ƒcšS]hÀ"Æ'Ò

Y[3\:“”3«%'hÀSè€|[w-€-•Sˆ:éˆY[hÀ3{\noµ²ëÅcº3C“”²«%-:Iýyz'ìå•#ƒµ¶·òÇ 5.5MV ²TŽ:‹.\¢[w! ! !
íîïðñòïÊ€ˆ3óÐÆ$ì¹ºPôˆi½ò¾¿3É !"## 3C

þ±²ëR:²ƒ

&ÔÐ$þ±PŒ\'´õ-[wà‘ö÷ïøÃ²ƒ&ÔÐ$¼ƒª3±ù²úR*×…\]*w!
tObVR !
#$%&nop²ÃU[IýyzP 6 dNae'¹…

YZU[3\:$3"É•eö•ûPüý\]÷:$3hÙb\'Iýyz'ìå•þ•²ƒ&²#ƒ„…†‡b\Î|Z—*¿V²¥ÿ!'-Z:%&3ª":#ƒ ·²úR*ŽV-[w2005 b 3 d 20 e312'œ*45€ˆ:„…'œ*…ˆ••ÝÞ3î$3%&'P'—3
hÀS()-[wLM‡'œ*kÕnop\]÷$3;<*P+,-ZU['›€€XˆÊ:12'œ*45P-RZ\]÷:$3(zP./0€|[w
12•‘3#$%&¼Ô&Ö345î$3…ˆ•%ƒ#„…V 5 d312À)œ÷Ù3-[êŒ%&Õ'²{#'²ƒ&yz'G*b\3()²()-[w4È'à«312€ˆ3«%Õ'²ß56'bVR[w !
(B! 12'œ÷:#$%&{7¸PNN¦¦ôÈ-[SôÈ3;<••ÁÂP¢Àw ! ! !
3B! ¼Ô&²2Œ=>²õ—-:€å#ƒµ¶·¸3{7¸i² (O_†$õ31\2-[w$3ÛÜ:>‰6kg¤cm2-G 3 SF6 ©ªÇ•–\:´$#ƒ#ƒµ¶·Pc¦¦ôÈb\'«%-:©ªÇ•6kg¤cm2-G \3Œ••#ƒµ¶·3©ÈPª«w !
$%!´$#ƒ#ƒµ¶·¸Ps8392'›€€XˆÊ:œ÷ ! :3©ÈPäˆY•Uw !
@B! #$%&V²ƒ&ÔÐ$3cº3®þ± 'PhÀSìåw!
&%!ïðñòïÊ€ˆ3²ƒ&²IýyzV;š<yz'=Ã-[w !
!
>k?@!
'!(! !)*!+,-./!01!/2*3!4567!809-:1 ;!<!=>"%!!>!