DF SERIES

DF-560E NanoTrace IIULTRA-TRACE COULOMETRIC OXYGEN MEASUREMENTS IN ULTRA-HIGH PURITY ELECTRONICGRADE GAS FOR QUALITY CONTROLFlexible	Broad detection range:
0-1ppb - 0-20ppm	Monitors multiple backgroundgases with a single unit

S ensor compensates for sample
and flow rate fluctuations - ideal
for upset prone applications	Operable via front panel or digitalcommunication options

EASY TO USE
DF-560E NanoTrace II
Designed to measure ultra-trace oxygento the very lowest levels, the DF-560E
delivers the semiconductor industry an
industry-leading 45ppt Lower Detection
Limit. Flexible and adaptable, theDF-560E is able to monitor O2 in multiple
background gases while logging data in avariety of formats. This device negates theeffects of upset prone applications, thanks
to Servomex’s high stability Coulometricsensing technology delivering a fast speedof response in the presence of sample andflow rate changes.
Ideal for semiconductor fabs and analyticalcarts, the DF-560E is optimized for ease ofuse and portability. Operation is made via
the front panel or digital communications,while various hand carry options makeit easy to transport. The DF-560E also
reduces operational costs through nondepleting, factory calibrated Coulometrictechnology, providing cost-effective setupand configuration. The only ongoing
maintenance requirement is an annual
SPAN calibration, with no programmablecell replacement needed.

Flexible portability

S implified ongoing maintenancerequirements

 ptional calibration system forO
compact integration onto therear of the panel, optimizing
device portability

 omprehensive automatedCdatalogging with 4 day and 30
day graphical reading records

Low cost of ownership
Factory
calibrated sensors for
simplified set-up


Requiresonly an annual
SPAN calibration

Non-depleting Coulometric sensor
with five year warranty

Expensive purifier replacements
not required

Unrivalled performanceIndustry-leading 45ppt Lower
Detection Limit (LDL) ses industry-leading CoulometricU
E-sensor technology	
Manufactured by Servomex over 60 years’ experience
with thousands of units usedin the field	
Fast speed of response

Benchmark compliance 	IEC 61010-1
 vervoltage Category II,OPollution Degree 2Learn more about the DF-560E NanoTrace II
VISIT SERVOMEX.COM

 	EU EMC Directive
EU Low Voltage DirectivePRODUCT OVERVIEW: DF-560E NanoTrace IIHigh stability coulometric traceand PERCENT measurements

ALTERNATIVE PRODUCTS

When you require the measurement of ultra-trace oxygen as acontaminant, either for quality control or leak detection purposes, youneed a gas analyzer that delivers performance, stability and reliability.
The lowest LDL is essential, as is the ability to carry out consistent, highstability measurements in upset prone applications, where sample andflow rate fluctuations can occur. Adaptable configuration options thatcan measure multiple background gases and flexible portability is alsoneeded, as is comprehensive datalogging and graphical records. No
matter what your application needs, you’ll want an analyzer that can
reduce your ongoing costs and provide operational efficiencies, and we
don’t believe you should have to compromise.

A no compromise solution
The DF-560E delivers oxygen measurement to the very lowest levels,
delivering users an exceptional LDL of 45ppt. This industry-leading
performance is augmented by a variety of extended operational
capabilities. Automated maintenance executes automatic zero andspan calibrations on a scheduled basis, or executes scheduled automatic
checks and notifies users when calibration is needed. An Automatic
Maintenance Log records water additions, sensor data, and calibration
activity to ensure ISO record-keeping requirements, while AutomatedData Logging builds four-day and thirty-day graphical records ofanalyzer readings.

The DF product range features anumber of options designed to meetyour application needs.

DF-340E

When you require an adaptable Coulometricsensing O2 analyzer designed for pure andmulti-gas backgrounds, choose the DF-340E.
This device also features a NEMA 4 rated
sensor enclosure.

DF-550E

If you need an ultra-trace O2 measurement
requiring a 200ppt LDL, choose the DF-550E:
an alternative analyzer offering the same highreliability and low maintenance requirements.

Simple maintenance and reduced
ongoing costs

DF-760E
NanoTrace

The DF-560E offers an attractive cost reduction over product life, thanks
to its pre-calibrated, long-life sensor that comes with a 5 year warranty.
The DF-560E requires only an annual SPAN calibration thereafter, with noprogrammable cell replacement requirement. Automated maintenancelogging is also provided and the DF-560E is available with a choice ofcalibration options; automatic zero and span on a scheduled basis andnotifications of a need for calibration; and a manual calibration system- compactly integrated on the rear of the panel, permitting enhanced
device portability.

When the most stringent UHP gas analysis
is called for in oxygen and moisture in one
compact platform we recommend theDF-760 NanoTrace Moisture Analyzer.
This device combines TDL and Coulometricsensing for trace contaminant measurementof moisture and O2 at ppt levels.

KEY APPLICATIONS uality control checks for electronics
Q
grade gases

TECHNOLOGIESL eak detection for electronics
grade gases

PRODUCT DATA: DF-560E NanoTrace II

OPTIONSDESCRIPTIONSPECIFICATION

Output4 analog and digital output options available

Non-isolated 0-5V DC, 0-1, 0-2, 0-5 or 0-10V DC.
Analog output can be configured to freeze duringcalibration

Output range

Output parameters

Any range between 0-20ppb and 0-10ppm (can handleup to 100ppm for up to 15 mins. at which time thesensor shuts down to prevent damage)

AlarmsConcentration, low flow and Electrolyte

4 O2 levels, electrolyte condition and temperature, 1
audible/visual flow alarm

Sample pressure regulator

For high purity measurements

3,000psig inlet capacity; 0-15psig adjustable outletpressure; requires 5psig min. inlet pressure (1/4” VCR
compatible fittings), supplied mounted or loose

Flow control valves

For high purity measurements

Ultra-high purity bellows valve for upstream isolation
shut-off and flow control (1/4” VCR compatible fittings)

Stab-El sensor system

Designed for samples containing trace acid or Ionic
contaminants

Enables operation with trace levels of acid gases or ioniccontamination. Samples containing trace samples ofacid components must use Stab-El option

Dual scale range

2 range options

User-selectable secondary analog output ranges forrescaling the output once the primary range is exceeded

Flammable sample outlet

Stainless steel

Recommended for H2 and other flammable gas streams

Supplementary battery input
powerPermits portability

Independent of AC power
Automated: provides menu-driven automatic zeroand span switching, pneumatic diaphragm valves andzero purifier in a small onboard package.

Calibration system

Automated calibration / manual calibration options

Auto-control of user cal.
components

Software for use with automated calibration

ACCESSORIESACCESSORIES AVAILABLE FOR SPECIFIC APPLICATIONS– CONTACT YOUR LOCAL SERVOMEX BUSINESS CENTER

Manual: provides manual quarter-turn springlessdiaphragm valves and zero purifier in an orbital
butt-welded assembly, compactly integrated on rearof device, for optimized portability
Switched V DC power for control of external, span/zerosolenoids and valves

MONITORING PERFORMANCE
GasO2 (purity)

Technology

CoulometricRange
Accuracy (intrinsic error) FS
Zero drift/month
T90 in secs.

0-1ppb – 0-20ppm±3% of reading / 3% of measurement range or ± 0.1ppb
Negligible<15 at 0.7liter/min

PRODUCT DATA:
DF-560E NanoTrace II

SAMPLE FOR MEASUREMENTS
Sample for measurement

Sample must be oil free, non-corrosive, non-condensing and non-flammable

Sample pressure

15 – 25psig (2.03 – 2.72 BarA)

Dew Point

5°C/9°F below minimum ambientParticulates

Filtered to 2µm

DEVICE SPECIFICATION

DEVICE SCHEMATIC

Size: 		
309mm (12.1”) Wide x 203 (7.9”)
High x 253mm (9.9”) Deep
Weight:	
8.2kg (18lbs)
Operating Temperature:	0°C - 45°C/32°F - 122°F

Compliance:	IEC 61010-1
 vervoltage Category II,
OPollution Degree 2	EU EMC Directive

PBDF560E Rev.1 Date: 06/15

EU Low Voltage Directive

These analyzers are not intended for any formof use on humans and are not medical devices
as described in the Medical Devices Directive
93/42EEC.

Please note: This document was updated in August 2014. While every effort has been made toensure accuracy, no responsibility can be accepted for errors or omissions. Data may change, as wellas legislation, and you are strongly advised to obtain copies of the most recently issued regulations,standards and guidelines. This document is not intended to form the basis of a contract.

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Servomex has a policy of constant product improvement and reserves the right to change specifications without notice.
© Servomex Group Limited. 2014. A Spectris company. All rights reserved.