王俊・島宗孝之・石澤伸夫・李鵬飛
セラミックス基盤工学研究センター年報 (2008). Vol. 8, 1-6

論文ᄥ㓁㔚ᳰ↪㜞⚐ᐲࠪ࡝ࠦࡦߩᣂߒ޿⵾ㅧᴺ㧔V㧕₺ବ̐࡮ፉቬቁਯ̑࡮⍹Ỉિᄦ̐࡮᧘㢈㘧̐̐ฬฎደᎿᬺᄢቇ࠮࡜ࡒ࠶ࠢࠬၮ⋚Ꮏቇ⎇ⓥ࠮ࡦ࠲࡯ ‫ޥ‬ጘ㒂⋵ᄙᴦ⷗Ꮢᣩࡩਐ ̑ፉቬᛛⴚ჻੐ോᚲ ‫᧲ޥ‬੩ㇺ↸↰Ꮢ᫪㊁ 
྾Ⴎൻ⃯⚛ߩ੝㋦ㆶరᴺߦࠃࠆ㜞⚐ᐲࠪ࡝ࠦࡦ⵾ㅧࡊࡠ࠮ࠬߦ㑐ߒߡฬฎደᎿᬺᄢቇ࠮࡜ࡒ࠶ࠢࠬၮ⋚Ꮏቇ⎇ⓥ࠮ࡦ࠲࡯ߢⴕࠊࠇߚᐕᐲߩ⎇ⓥᚑᨐࠍႎ๔ߔࠆ‫੹ޕ‬ᐕᐲߪ㧘੝㋦ߣ྾Ⴎൻ⃯⚛ߩㅪ⛯ଏ⛎ߦࠃࠆㅪ⛯ㆇォ㧘᳓ᐔ෻ᔕ▤ߦ߅ߌࠆࠪ࡝ࠦࡦߩ↢ᚑ㧘ု⋥෻ᔕ▤ߦ߅ߌࠆ↢ᚑ‛ߣឃࠟࠬߣߩಽ㔌㧘ု⋥෻ᔕ▤ߩਅㇱᧃ┵ߦ⟎޿ߚလႂߦ߅ߌࠆ↢ᚑࠪ࡝ࠦࡦߩ෼㓸╬ࠍᔨ㗡ߦ߅޿ߡ⎇ⓥࠍⴕߞߚ‫ޕ‬੝㋦ଏ⛎ᴺߦ㑐ߒߡߪ㧘㧝㧕੍߼ṁⲢߒߚ੝㋦ࠍࠝ࡯ࡃ࡯ࡈࡠ࡯ᣇᑼߢ੝㋦⫳⊒ᮏߦㅍࠆᣇᑼ㧘߅ࠃ߮㧞㧕੝㋦ࡢࠗࡗ࡯ࠍ⋥ធ㧘ṁⲢ᳇ൻኈེߦㅍࠅㄟ߻ᣇᑼߩੑ⒳㘃ߦߟ޿ߡᬌ⸛ࠍ߅ߎߥߞߚ‫↢ߩࡦࠦ࡝ࠪޕ‬ᚑߦ㑐ߒߡߪ㧘⫳⊒ኈེߦㅍࠅㄟ߹ࠇߚ੝㋦ࠍ᳇ൻߒ㧘ᶧ⁁ߢଏ⛎ߐࠇࠆ྾Ⴎൻ⃯⚛ߣ⋥ធ෻ᔕߔࠆࠃ߁ߥⵝ⟎਄ߩᎿᄦࠍ⹜ߺߚ‫ޕ‬෻ᔕ▤ฦㇱߩ᷷ᐲࠍ⒳‫⸳ߦޘ‬ቯߒ㧘᳓ᐔ߅ࠃ߮ု⋥෻ᔕ▤ߩฦ㗔ၞߢណ㓸ߒߚ෻ᔕ↢ᚑ‛ߩᒻᘒߣ㊂ࠍ⺞ߴߚ‫ޕ‬↢ᚑ‛ߩࠠࡖ࡜ࠢ࠲࡝࠯࡯࡚ࠪࡦߦ㑐ߒߡߪ㗼ᓸ㏜ⷰኤ㧘න⚿᥏㨄✢࿁᛬᷹ቯ㧘߅ࠃ߮☳ᧃ㨄✢࿁᛬᷹ቯࠍⴕߞߚ‫ޕ‬

A Novel Fabrication Technique of High-Purity Siliconfor Solar Cell Application (V)Jun Wang† ,†Takayuki Shimamune‡ , Nobuo Ishizawa†, Pengfei Li†
Ceramics Research Laboratory, Nagoya Institute of Technology,Asahigaoka 10-6-29, Tajimi, Gifu 507-0071 JAPAN‡Dr. Shimamune Consulting Engineer Office, Morino 4-15-14, Machida, Tokyo 194-0022

Fiscal 2008 year achievements at Ceramics Research Laboratory, Nagoya Institute of Technology, on the fabrication of
the high-purity silicon for solar-cell applications based on the reduction technique of silicon tetrachloride by zinc havebeen reported. The aims of this year were taken at the continuous operation based on the successive supply of raw
materials, nucleation and growth of silicon particles in the horizontal reaction tube, separation of silicon particles fromexhaust gas in the vertical reaction tube, and accumulation of silicon products in a crucible placed at the bottom of thevertical tube. Two methods were examined on the successive zinc supply, 1) transfer of zinc melt into the evaporation
vessel by the overflow mechanism, 2) direct supply of zinc wire into a single vessel that functions both melting andevaporation. A direct reaction between the silicon tetrachloride in liquid form and zinc vapor was attempted through thecontrivance in design of the reaction apparatus. The system was operated at controlled temperatures over various blocksof reaction tubes. Shapes and amounts of the reaction products found at these blocks were examined. Microscopic
observations, and single-crystal and powder diffraction studies were carried out for the characterization of products.

―1―

太陽電池用高純度シリコンの新しい製造法（V）

ኈེߦㅍࠇ߫⦟޿ߩߢ㧘᭴ㅧ⊛ߣߒߡߪ◲නߦߥࠆߪߕߢ޽ࠆ㧝 ߪߓ߼ߦ੝㋦ㆶరᴺߦࠃࠆ㜞⚐ᐲࠪ࡝ࠦࡦߩ⵾ㅧߦ㑐ߔࠆᚒ‫߹੹ߩޘ‬߇㧘ᛩ౉ߔࠆ੝㋦ࡢࠗࡗ࡯ߩ๟ࠅߩࠪ࡯࡝ࡦࠣ߇໧㗴ߣߥߞߚ‫ޕ‬ߢߩ⎇ⓥ⚿ᨐ߆ࠄ㧘1) ੝㋦ࠟࠬਛߦᶧ⁁ߩ྾Ⴎൻ⃯⚛ࠍട߃ࠆ੹࿁ߪ੝㋦ࡢࠗࡗ࡯ࠍ㧘ߘࠇࠃࠅ௖߆ߦᄥ޿ PTFE㧔ࡐ࡝࠹࠻ߎߣ㧘2) ෻ᔕႡࠍ᳓ᐔㇱߣု⋥ㇱߦಽߌ㧘᳓ᐔㇱߢ෻ᔕࠍቢ⚿࡜ࡈ࡞ࠝࡠࠛ࠴࡟ࡦ㧕⵾ߩ㐳޿࠴ࡘ࡯ࡉౝࠍㅢߒߡᝌ౉ߒߚ‫ޕ‬ߐߖ㧘3) ု⋥ㇱߢߪࠪ࡝ࠦࡦߩ☸ᚑ㐳ࠍଦߔߣ౒ߦ᳇⋧ߢ޽ࠆߎࠇߪᄖ᳇ߣߩធ⸅ㇱಽߣ੝㋦⫳⊒ㇱߩ㑆ߩ࿶៊ࠍᄢ߈ߊߔࠆ෻ᔕࠟࠬߣߩಽ㔌ࠍⴕ߁ߎߣߥߤ߇㧘ዊဳߩⵝ⟎ߢ⍴ᤨ㑆ߦᄙߩߦᓎ┙ߞߚ‫ߚ߹ޕ‬੝㋦⫳⊒ኈེౝߪ௖߆ߦട࿶ߐࠇߚ⁁ᘒߦ㊂ߩࠪ࡝ࠦࡦࠍᓧࠆߚ߼ߦ㊀ⷐߢ޽ࠆߣ⠨߃ߡ޿ࠆ‫ޕ‬1)-4) ᧄ⎇ⓥߥࠆࠃ߁ߢ㧘ߎࠇ߽ᄖ᳇ߩଚ౉ࠍ㒐ߋߩߦᓎ┙ߞߚ‫ޕ‬ߪߎߩࠃ߁ߥ⠨߃ߦ߽ߣߠ߈㧘ࠪ࡝ࠦࡦߩㅪ⛯⊛⵾ㅧߦะߌߚ޿ߊߟ߆ߩ⹜ߺࠍⴕߞߚ‫ౕޕ‬૕⊛ߦߪ㧘߹ߕ㧘੝㋦ߩଏ⛎ࠍࡃ࠶࠴ᑼ߆ࠄㅪ⛯ଏ⛎ᣇᑼߦᄌᦝߒߡㅪ⛯ㆇォᤨ㑆ࠍࠃࠅ㐳ߊߒ㧘ᄙ㊂ߩࠪ࡝ࠦࡦࠍᓧࠃ߁ߣߒߚ‫ޕ‬㧞 ታ㛎੹߹ߢߪ੝㋦ේᢱߣߒߡ 2mmǾࡢࠗࡗ࡯ࠍ↪޿㧘ߎࠇࠍ੍߼
⚦߆ߊಾᢿߒߡ੝㋦⫳⊒ኈེߦߟ߼ߡ߅߈㧘ߘࠇࠍ⫳⊒ߐߖߥ߇ࠄ྾Ⴎൻ⃯⚛ࠍ෻ᔕ▤ਛߦṢਅߔࠆࠃ߁ߦߒߡ޿ߚ‫੹ޕ‬࿁ߪ㧘ߎߩ੝㋦⫳⊒ኈེਛߦ੝㋦ࠍㅪ⛯⊛ߦଏ⛎ߔࠆߚ߼ߩࡢࠗࡗ࡯⥄േㅍࠅⵝ⟎ࠍ⵾૞ߒߚ‫ߚ߹ޕ‬㧘዁᧪ߩᎿᬺൻࠍ⠨ᘦߒ㧘੍߼࿑㧞 ੝㋦ଏ⛎ⵝ⟎(2)㧔੝㋦ࡢࠗࡗ࡯ࠍ⋥ធ੝㋦ࠍṁⲢኈེߢṁⲢߒ㧘੝㋦Ⲣ૕ࠍࠝ࡯ࡃ࡯ࡈࡠ࡯ᣇᑼߢ੝⫳⊒ᮏߦㅍࠆ㧕㋦⫳⊒ኈེߦㅍࠆᣇᑼ(એ㒠㧘ࠝ࡯ࡃ࡯ࡈࡠ࡯ᴺߣ๭߱)㧘߅ࠃ߮੝㋦ࡢࠗࡗ࡯ࠍ⋥ធ㧘ṁⲢ౗⫳⊒ኈེߦㅍࠅㄟ߻ᣇᑼ㧔એ㒠㧘⋥ធᛩ౉ᴺߣ๭߱㧕ߩੑߟߦߟ޿ߡᬌ⸛ࠍ߅ߎߥߞߚ‫ޕ‬㧞㧟ታ㛎ⵝ⟎ⵝ⟎ో૕ߩᮨᑼ࿑ࠍ࿑ 3 ߦ␜ߔ‫ߚ߹ޕ‬ㆇォਛߩ౮⌀ࠍ࿑ 4 ߦ␜ߔ‫߅ߥޕ‬࿑ 3 ߪ੝㋦ࡢࠗࡗ࡯ࠍ੝㋦⫳⊒ኈེߦ⋥ធଏ⛎ߔࠆ㧞㧝ࠝ࡯ࡃ࡯ࡈࡠ࡯ᴺⵝ⟎ߩᮨᑼ࿑ࠍ࿑ 1 ߦ␜ߔ‫ޕ‬੝㋦ࡢࠗࡗ࡯ߪ੝㋦ṁⲢኈེߦଏ⛎ߐࠇࠆ‫ޕ‬ṁⲢߒߚ੝㋦ߪ࠻࡜࠶ࡊࠍขࠅઃߌߚㅍࠅࡄࠗࡊ
߆ࠄ੝㋦⫳⊒ኈེ߳⒖േߒߡ⫳⊒ߔࠆ‫߅ߥޕ‬੝㋦ṁⲢኈེߩⲢ૕⴫㕙ߪ㉄ൻߩᕟࠇ߇᦭ࠆߩߢ㧘ṁⲢኈེߦࠕ࡞ࠧࡦࠟࠬࠍଏ⛎ߒߚ‫ޕ‬႐วߩ࿑ߢ޽ࠅ㧘੝㋦ߩṁ⸃ኈེࠍ੺ߔࠆ႐วߪᏀ਄ߩ౞ౝߦ␜ߒߚ᭽ߥᒻߣߥࠆ‫ޕ‬੝㋦⫳⊒ኈེߢ⫳⊒ߒߚ੝㋦ࠟࠬߪ㧘෻ᔕႡౝࠍ㧘ឃࠟࠬಣℂㇱߦะ߆ߞߡᵹࠇࠆ‫ޕ‬෻ᔕႡ೨Ბߩ਄ㇱ߆ࠄ྾Ⴎൻ⃯⚛߇ଏ⛎ߐࠇ,ߘߎߢ 2Zn + SiCl4 Î Si + 2ZnCl2
ߩ෻ᔕ߇⿠ߎࠆ‫ޕ‬෻ᔕႡߩ᳓ᐔ෻ᔕ▤ࠍ Si, ᧂ෻ᔕ Zn㧘෻ᔕ↢ᚑ‛ߢ޽ࠆ ZnCl2㧘߅ࠃ߮ਇᵴᕈ Ar ࠟࠬ߇ឃࠟࠬಣℂㇱߦะ߆ߞߡᵹࠇࠆ‫ޕ‬෻ᔕ▤ౝߩ᳇ᵹߪ᳓ᐔ෻ᔕ▤ౝߦ߅߆ࠇߚ㇎㝷᧼╬ࠍ੺ߒߡੂᵹൻߐࠇࠆ‫ߩࠬࠟޕ‬ᷙวਗ߮ߦ Si (ࠪ࡝ࠦࡦਗ߮ߦࠪ࡝ࠦࡦ೨㚟૕)ห჻ߩ⋧੕ⴣ⓭߇ỗߒߊ⿠ߎࠅ㧘ࠪ࡝ࠦࡦ⚿᥏ߣߒߡᚑ㐳ߔࠆ‫ޕ‬4) ߎߩࠃ߁ߦߒߡ↢ᚑߒߚࠪ࡝ࠦࡦࠍ฽߻෻ᔕࠟࠬߪ᳓ᐔ෻ᔕ▤ౝߦ৻ㇱߩࠪ࡝ࠦࡦࠍၸⓍߒߥ߇ࠄု⋥෻ᔕ▤߳⥋ࠅ㧘ࠟࠬߣ࿕૕ࠪ࡝ࠦࡦ߇ಽ㔌ߒ㧘ࠪ࡝ࠦࡦߪਅᣇߦ⪭ਅߔࠆߣ౒ߦ㧘৻ㇱߪု⋥෻ᔕ▤ოߦઃ⌕ߔࠆ‫ߪࠬࠟޕ‬ឃ᳇▤ࠍㅢߞߡឃࠟࠬಣℂㇱߦ⒖ⴕߒ㧘࿕૕ߣߥߞߡၸⓍߔࠆ‫ޕ‬྾Ⴎൻ⃯⚛ߩଏ⛎ߪ㧘ᓥ᧪ߣหߓߊಽᶧࡠ࡯࠻ߦ౉ࠇߚ྾Ⴎൻ⃯⚛㧔SiCl4㧕ᶧࠍ਄ㇱଏ⛎ญ߆ࠄ㊀ജ㒠ਅߢଏ⛎ߔࠆࠃ߁ߦߒ㧘ଏ⛎㊂ߩ⺞ᢛߪಽᶧࡠ࡯࠻ߩࡃ࡞ࡉߣߘߩవߦ⸳ߌߚ࠾࡯
࠼࡞ࡃ࡞ࡉߩੑߟߩࡃ࡞ࡉࠍ⺞ᢛߒߡⴕߞߚ‫ޕ‬ᶧᵹ㊂⸘ߪ⸳ߌߥ߆ߞߚ߇㧘ಽᶧࡠ࡯࠻߳ߩଏ⛎㊂ߪ㧝࿁ᒰߚࠅ SiCl4 200g ߢ࿑㧝 ੝㋦ଏ⛎ⵝ⟎(1) 㧔Ꮐߩ੝㋦Ⲣ⸃ኈེࠍ

޽ࠅ㧘ߎࠇࠍ 10 ಽ߆ࠄ 15 ಽߩᤨ㑆ࠍ߆ߌߡ෻ᔕႡ߳ଏ⛎ߔࠆ੺ߒߡฝߩ⫳⊒ኈེߦㅍࠆ㧕ࠃ߁ߦߒߚ‫ޕ‬ಽᶧࡠ࡯࠻ߪᐥ߆ࠄ 2m ⒟ᐲߩ㜞ߐߦ૏⟎ߒ㧘㐿ᆎᤨὐߣቢੌᤨὐߢߩᵹ㊂ߪ߶ߣࠎߤᄌࠊࠄߥ޿ࠃ߁ߢ޽ߞߚ‫ޕ‬㧞㧞⋥ធᛩ౉ᴺ

ߎߩଏ⛎㊂ߪ㧘෼₸ 100%ࠍ઒ቯߒߚㅪ⛯ㆇォߢ឵▚ߔࠆߣ㧘1ⵝ⟎ߩᮨᑼ࿑ࠍ࿑ 2 ߦ␜ߔ‫ޕ‬੝㋦ࡢࠗࡗ࡯ࠍනߦṁⲢ౗⫳⊒~ 1.5ton-Si / ᐕߩ↢↥㊂ߦ⋧ᒰߔࠆ‫ޕ‬੝㋦ߩㅍࠅߪ 20 mm/sec―2―

王俊・島宗孝之・石澤伸夫・李鵬飛ߢ޽ࠅ㧘ߎࠇߪℂ⺰㊂ߩ⚂ 1.7 ୚ߢ޽ࠅ㧘෻ᔕ▤ߪ੝㋦ㆊ೾㔓㗴ߣߥࠆߎߣߪή޿ߣ⠨߃ࠄࠇࠆ‫ޕ‬ടᾲਛߩ੝㋦⴫㕙౮⌀ࠍ࿑ 5࿐᳇ਛߦߥߞߡ޿ࠆ‫ ߅ߥޕ‬SiCl4 ߪಽᶧࡠ࡯࠻߆ࠄో㊂߇ᵹࠇ಴ߦ␜ߔ‫⴫ޕ‬㕙߇ࠬ࡜ࠣ⁁ߩ㉄ൻ‛ߢⷒࠊࠇߡ߅ࠅ㧘੝㋦⫳᳇ߩߔ೨ߦ⵬లߔࠆߎߣߢㅪ⛯ㆇォ߇น⢻ߣߥߞߡ޿ࠆ‫ޕ‬⊒↢ߪ⷗ࠄࠇߥ߆ߞߚ‫߅ߥޕ‬㧘⍹⧷ࠟ࡜ࠬ⵾ߩṁ⸃ኈེࠍ↪޿ߚ႐วߪ㧘৻ᣤ᷷ᐲࠍਅߍߡ੝㋦ࠍ࿕ൻߔࠆߣṁ⸃ኈེߩ৻ㇱ߇⎕៊ߔࠆߎߣ߇޽ߞߚ‫ߩߎޕ‬ℂ↱ߪ㧘੝㋦ߩᾲ෼❗ߣ㧘⍹⧷ࠟ࡜ࠬߩߘࠇߣߦᏅ߇޽ࠅ㧘ߒ߆߽⍹⧷ࠟ࡜ࠬߦኻߔࠆ੝㋦ߩỨࠇᕈ߇ᭂ߼ߡ⦟޿ߚ߼ߢ޽ࠆߣ⠨߃ࠄࠇࠆ‫ޕ‬⋥ធᛩ౉ᴺߢߪ㧘੝㋦ࡢࠗࡗ࡯ࠍㅢߔߚ߼ߩ PTFE ࠴ࡘ࡯ࡉߦߪౝᓘ 4mm, 㐳ߐ⚂ 2m ߩ߽ߩࠍ૶↪ߒߚ‫♽ޕ‬ᄖ߆ࠄߩ㉄⚛
ߩᷙ౉ߪᱴߤ⷗ࠄࠇߕ㧘੝㋦⫳⊒ᮏߦ߅ߌࠆ⊕⦡ߩ㉄ൻ‛↢ᚑ߽⷗ࠄࠇߥ߆ߞߚ‫ޕ‬PTFE ࠴ࡘ࡯ࡉ߆ࠄ੝㋦ࡢࠗࡗ࡯ࠍᛮߊߣ㧘෻ᔕႡ♽ౝ߆ࠄߩࠟࠬߩࠊߕ߆ߥㅒᵹ߇޽ࠅ㧘ᄖ᳇ߩๆ޿ㄟߺߪή޿ߣ⠨߃ࠄࠇࠆ‫ޕ‬෻ᔕਛߩ੝㋦ଏ⛎ㇱߩ౮⌀ࠍ࿑ 6 ߦ␜ߒߚ‫ޕ‬੝㋦⫳⊒ኈེߩ᳇ൻ⢻ജߪචಽߢ޽ࠅ㧘⛮⛯⊛ߥ੝㋦ࠟࠬ࿑㧟 ㅪ⛯෻ᔕⵝ⟎ᮨᑼ࿑ߩ⊒↢ࠍ⛽ᜬߢ߈ߚ‫ޕ‬࿑㧠 ㆇォਛߩ෻ᔕⵝ⟎࿑㧡 ṁⲢ੝㋦⴫㕙 Ⲣ⸃ਛ㧔Ἱ᷷ᐲ 650͠㧕

㧟 ታ㛎⚿ᨐ㧟㧝 ੝㋦ଏ⛎ࠝ࡯ࡃ࡯ࡈࡠ࡯ᴺߢߪᒰೋ ᔨߒߚⲢ⸃ㇱ⴫㕙ߩ㉄ൻ‛ᒻᚑࠍㆱߌࠆߎߣ߇಴᧪ߕ㧘Ⲣ⸃ਛ߽⴫㕙ࠍⷒ޿⛯ߌߡ޿ߚ‫ޕ‬ૉߒߘࠇ߇ᷓೞߥ໧㗴ߣߥࠆࠊߌߢߪߥ߆ߞߚ‫߅ߥޕ‬㧘੝㋦ߩⲢὐߪ 419.5͠ߢ޽ࠆ߇㧘ታ㓙ߦߪ 650͠⒟ᐲߩ᷷ᐲࠍᔅⷐߣߔࠆߎ
ߣ߇ࠊ߆ߞߚ‫⴫ޕ‬㕙ߩ㉄ൻ੝㋦߇ࠬ࡜ࠣ⁁ߦߥߞߡౝㇱߩ੝㋦
Ⲣ૕ߩ଻⼔ࠍⴕ޿㧘੝㋦⫳᳇߽߶ߣࠎߤ಴ߥ߆ߞߚ‫ࡊ࠶࡜࠻ޕ‬ㇱ߆ࠄṁⲢ੝㋦ࠍࠝ࡯ࡃ࡯ࡈࡠ࡯ߐߖࠆߦߪ੝㋦ߩ☼ᕈ߇㊀ⷐߥⷐ⚛ߢ޽ࠆ‫ޕ‬ታ㛎ߦࠃߞߡߪ޽ࠆ⒟ᐲ㑆᱉⊛ߦ੝㋦߇ଏ⛎ߐࠇࠆ႐ว߽޽ࠅ㧘ቢోߦㅪ⛯⊛ߥㆇォ߇޿ߟ߽಴᧪ࠆࠊߌߢߪߥ߆ߞߚ‫ߚ߹ޕ‬㧘৻ᐲ᷷ᐲࠍਅߍߚ႐ว㧘ౣ᣹᷷ᤨߦ㉄ൻ‛߇࿑㧢 ේᢱ Zn ࡢࠗࡗ࡯ଏ⛎ᯏ᭴ᶧਛߦᷙߑࠅ㧘⚦߆޿☳ᧃߩ㉄ൻ‛߇੝㋦ߣ౒ߦ⫳⊒ㇱߦ⒖ⴕߔࠆߎߣ߇޽ߞߚ‫⟎ⵝߪࠇߎޕ‬ᳪᨴߩේ࿃ߣߥࠆน⢻ᕈ߇᦭ࠆ‫ޕ‬߽ߞߣ߽㧘ቢోߥㅪ⛯ṁⲢ-ㅪ⛯ଏ⛎ࠍ߅ߎߥ߁Ꮏᬺ↪ㅜߩ႐ว㧟㧞 ㅪ⛯ㆇォߪ㧘ࡔࡦ࠹࠽ࡦࠬએᄖߢߪἹߩ᣹㒠᷷ࠍߒߥ޿ߩߢ㧘ߎࠇ߇໧―3―

࿑ 4 ߦ␜ߔⵝ⟎ߦࠃߞߡ㧘੝㋦ࡢࠗࡗ࡯ߩ⋥ធᛩ౉ᴺߦࠃࠆ

太陽電池用高純度シリコンの新しい製造法（V）

ㅪ⛯ㆇォߩ⹜ߺࠍⴕߞߚ‫ޕ‬ᓥ᧪ߪ੝㋦ଏ⛎߇ࡃ࠶࠴ᑼߩߚ߼㊂

൨㈩ߦࠃߞߡ೙ᓮߢ߈ࠆߎߣࠍ␜ໂߒߡ޿ࠆ‫ߒ߆ߒޕ‬ၸⓍߒߚ߇㒢ቯߐࠇ㧘ߎࠇߦวࠊߖߡ྾Ⴎൻ⃯⚛ߩଏ⛎߽ᦨᄢ 200g ߦ㒢ࠪ࡝ࠦࡦߪో૕⊛ߦዋߥ߆ߞߚ‫ߪࠇߎޕ‬᷷ᐲߩჇടߦ઻ߞߡ㧘ࠄࠇߚ‫੹ޕ‬࿁ߪߎߩ᜔᧤߇ߥߊߥࠅ㧘྾Ⴎൻ⃯⚛ߩଏ⛎㊂ࠍߘࠪ࡝ࠦࡦ߇ឃࠟࠬߣߣ߽ߦ෻ᔕ▤╬߆ࠄᵹ಴ߒߚߚ߼ߣ⠨߃ࠄ

ߩ୚㊂߹ߢჇടߔࠆߎߣ߇ߢ߈ߚ‫ޕ‬ࠇࠆ‫⚻ޕ‬㛎਄ߢߪ㧘ࠪ࡝ࠦࡦߩო㕙߳ߩᨆ಴ߪ 1050͠એ਄ߩ㜞෻ᔕᮏ߳ߩࠕ࡞ࠧࡦࠟࠬߩଏ⛎ߪ੹߹ߢߪ 0.5 l/min ⒟ᐲߣ

᷷ߢߪ⿠ߎࠅߦߊ޿‫ߒ߆ߒޕ‬㜞᷷ߦߔࠆߣ↢ᚑࠪ࡝ࠦࡦ☸ሶ㑆ߒߡ޿ߚ‫੹ޕ‬࿁ߪ㧘੝㋦ࡢࠗࡗ࡯ଏ⛎ㇱಽ߆ࠄߩⓨ᳇ߩㅴ౉ࠍߩಝ㓸߽⿠ߎࠄߥߊߥࠆߣ޿߁໧㗴߇޽ࠆ‫⋥ုޕ‬ㇱߩࠟࠬㅦᐲ㧘㒐ߋߚ߼㧘੝㋦ࡢࠗࡗ࡯ଏ⛎ㇱߦ߽ 0.5 l/min ߩࠕ࡞ࠧࡦࠟࠬࠍ᷷ᐲࠍ฽߼ߚⵝ⟎ࡄ࡜ࡔ࡯࠲ߩᦝߥࠆᬌ⸛߇ᔅⷐߢ޽ࠆ‫ߚ߹ޕ‬㧘ᵹߔࠃ߁ߦߒ㧘ว⸘ 1 l/min ߩࠕ࡞ࠧࡦࠟࠬࠍ↪޿ߚ‫࡞ࠕ߅ߥޕ‬ု⋥෻ᔕ▤ౝߩ᳇ᵹߩᵹࠇࠍࠃࠅࠨࠗࠢࡠࡦൻߔࠆߎߣ߇ࠪ࡝ࠧࡦࠟࠬ㊂ߪᏱ᷷឵▚ߢ޽ࠆ‫ޕ‬ࠦࡦߩಽ㔌ߩߚ߼ߦ㊀ⷐߣᕁࠊࠇࠆ‫ޕ‬ࠕ࡞ࠧࡦࠟࠬ㊂ߩჇടߦ߽߆߆ࠊࠄߕ㧘෻ᔕ⥄りߪ໧㗴ߥߊߥ߅㧘⃻࿷૶↪ߒߡ޿ࠆⵝ⟎ߢߪု⋥෻ᔕ▤ߩ⋥ᓘ߇ᄢ߈ߊ㧘ㅴࠎߢ޿ࠆࠃ߁ߦⷰኤߐࠇߚ‫↢ߒ߆ߒޕ‬ᚑߒߡ޿ࠆߪߕߩ෻ᔕᓥߞߡߘߎߢߩࠟࠬᵹㅦ߇ਇචಽߢ޽ࠅ㧘᳓ᐔ෻ᔕ▤߆ࠄု⋥ⵝ⟎ౝߩࠪ࡝ࠦࡦߩᱷ⇐ߪዋߥߊ㧘߻ߒࠈឃࠟࠬಣℂⵝ⟎ౝߦ෻ᔕ▤߳⥋ࠆ㑆ߦࠟࠬᵹㅦࠍჇടߔࠆᚻᲑ߇ᔅⷐߣ⠨߃ࠄࠇࠆ‫ޕ‬ᄙ㊂ߦ㉄ൻ‛ߣߒߡၸⓍߒ㧘ឃࠟࠬߩਥᚑಽߢ޽ࠆႮൻ੝㋦㧘ု⋥෻ᔕ▤ߦ߅ߌࠆࠨࠗࠢࡠࡦലᨐߪ⃻⁁ߢߪ߶ߣࠎߤല޿ߡ

㉄ൻ੝㋦㧔ᧂ෻ᔕ੝㋦߇㧘ᄢ᳇ਛߢΆ὾ߒߡ↢ߓߚ߽ߩ⠨߃ࠄ޿ߥ޿ߣ޿߃ࠆ‫ޕ‬ࠇࠆ㧕ߣ౒ሽߒߡ޿ߚ‫ߩߎޕ‬ේ࿃ߪ♽ౝߦ߅ߌࠆࠕ࡞ࠧࡦࠟࠬ
ࠍ฽߼ߚోࠟࠬ㊂ߩჇട㧘ߟ߹ࠅࠟࠬᵹㅦߩჇᄢߣ⠨߃ࠄࠇߚ‫ޕ‬ߘߎߢᧄ૕஥ߩࠕ࡞ࠧࡦࠟࠬଏ⛎ࠍ஗ᱛߒ㧘੝㋦ࡢࠗࡗ࡯ଏ⛎
ㇱ߳ߩࠕ࡞ࠧࡦࠟࠬଏ⛎ߩߺߣߒ㧘ߘߩ㊂ࠍ 0.5 l/min ߣߒߡㆇォࠍⴕߞߚߣߎࠈ㧘↢ᚑߒߚࠪ࡝ࠦࡦߪ♽ౝߦ߶߷ᱷ⇐ߔࠆࠃ߁ߦߥߞߚ‫ࠬࠟࡦࠧ࡞ࠕޕ‬ଏ⛎㊂ߩᦨㆡൻ߇੹ᓟߩታ㛎ߩ⺖㗴ߢ޽ࠆ‫ޕ‬ᦨ⚳⊛ߥ෻ᔕ᧦ઙࠍએਅߦ⸥ߔ‫߅ߥޕ‬㧘྾Ⴎൻ⃯⚛ߩଏ⛎ߪ੝㋦ଏ⛎߇቟ቯߒߡ߆ࠄ㐿ᆎߒ㧘⚂ 30 ಽ㑆ߩㅪ⛯ଏ⛎ࠍⴕߞߚ‫ޕ‬1)㔓࿐᳇ࠟࠬ Ar : 0.5 l/min (Ᏹ᷷ߦ߅޿ߡ)

2)

ⵝ⟎᷷ᐲ
੝㋦⫳⊒ㇱ㧦 1050͠࿑㧣 ታ㛎⚳ੌᓟ෻ᔕ▤ߩฦᚲ߆ࠄណ㓸ߒߚࠨࡦࡊ྾Ⴎൻ⃯⚛ᛩ౉ㇱ㧦 1050͠

࡞㧔਄࿑ߪု⋥෻ᔕ▤᷷ᐲ߇ 950͠㧘ਅ࿑ߪ᳓ᐔ෻ᔕㇱ㧦 1050 – 1100͠

1000͠㧕

ု⋥෻ᔕႡㇱ㧦 950͠ ߣ 1000͠ឃࠟࠬㇱ㧦 1000͠
3) ੝㋦ଏ⛎ 㧦 20 mm/sec. (=120 cm/min.)(2mmǾ 4 – 5N wire)4) ྾Ⴎൻ⃯⚛(SiCl4)ଏ⛎㧦13 – 15 g/min.
ု⋥෻ᔕ▤ߩ᷷ᐲ߇ 950͠ߩߣ߈㧘ⵝ⟎ౝߦࠪ࡝ࠦࡦߩ↢ᚑߣ
ၸⓍ߇ᐢ޿▸࿐ߦᷰߞߡ⿠߈ߚ‫ᦨ▤⋥ုߒ߆ߒޕ‬ਅㇱߦ⟎޿ߚࠪ࡝ࠦࡦ෼㓸↪လႂౝ߳ߩၸⓍߪዋߥ߆ߞߚ‫ޕ‬လႂ߳ߩ㓸ਛၸ
Ⓧ߇੹ᓟߩ⺖㗴ߣߒߡᱷߞߚ‫߅ߥޕ‬㧘ု⋥෻ᔕ▤ߩᦨ਄ㇱߩოߦߪ㧘޽ࠆ⒟ᐲᚑ㐳ߒߚࠪ࡝ࠦࡦ߇ᨆ಴ߒߡ޿ߚ‫⁁ߩߘޕ‬ᘒߪⶊ⦡ᓸ☳ᧃ⁁ߩᒻᘒࠍ߽ߟ߽ߩߣ㧘ᚑ㐳ߒߚ㤥⦡ߩࠪ࡝ࠦࡦߣ
ߩᷙว‛߇ਥ૕ߢ޽ߞߚ‫ޕ‬ណขߒߚࠪ࡝ࠦࡦࠨࡦࡊ࡞ࠍ࿑ 7 ߦ␜ߔ‫↢ޕ‬ᚑߒߚࠪ࡝ࠦࡦࠨࡦࡊ࡞ߩૐ୚₸㗼ᓸ㏜౮⌀ࠍ࿑ 8 ߦ␜ߔ‫ޕ‬ㇱಽ⊛ߦᚑ㐳ߒߚ㊎⁁᥏㧔㤥⦡㧕ߣⶊ⦡ߩࡃ࡞ࠢㇱಽ߇࿑㧤 ↢ᚑ‛ߩታ૕㗼ᓸ㏜౮⌀‫ࠢ࠶࡝࠻ࡑ⁁⦡ⶊޕ‬⷗ࠄࠇߚ‫⋥ုߪߢ߹੹ޕ‬෻ᔕ▤ߩოㇱಽ߳ߩ⚿᥏ߩᨆ಴ߪ߶ߣࠬਛߦ㤥⦡㊄ዻశᴛߩࠪ࡝ࠦࡦන⚿᥏߇޽ࠎߤ⷗ࠄࠇߥ߆ߞߚ‫੹ޕ‬࿁ߪ㧘ု⋥ㇱߩ᷷ᐲ߇ 950͠ߣૐ߆ߞ

ࠆ‫ޕ‬ߚߚ߼ߦო߳ߩᨆ಴߇⿠߈ߚߣᕁࠊࠇࠆ‫ޕ‬ု⋥෻ᔕ▤ߩ᷷ᐲ߇ 1000͠ߩߣ߈ߪ㧘950͠ߦᲧߴ㧘෻ᔕ▤ਅㇱߩလႂ߆ࠄᲧセ⊛ᄙ㊂ߩࠪ࡝ࠦࡦ߇ណ㓸ߐࠇߚ‫ߣߎߩߎޕ‬㧟㧟 ྾Ⴎൻ⃯⚛ߩଏ⛎ᴺߪ㧘᳓ᐔ෻ᔕ▤╬ߩㇱಽߢ↢ᚑߔࠆࠪ࡝ࠦࡦߩ㊂߽㧘Ἱߩ᷷ᐲ―4―ᧄⵝ⟎ߢߪ੝㋦ࠟࠬਛߦ྾Ⴎൻ⃯⚛ࠍᶧ૕ߢଏ⛎ߒߡ޿ࠆߩ

王俊・島宗孝之・石澤伸夫・李鵬飛

߇․ᓽߢ޽ࠆ‫ޕ‬Ᏹ⼂⊛ߦ⠨߃ࠆߣ㧘ᴣὐ߇ 57͠ߩ྾Ⴎൻ⃯⚛ߣ㧘᳇߇♽ౝߦዉ౉ߐࠇࠆน⢻ᕈߪዋߥߊߥࠆ‫ߡߒߦ߁ࠃߩߎޕ‬቟

ᴣὐ߇ 910͠ߩ੝㋦ߣߩ෻ᔕߢ޽ࠆ߆ࠄ㧘྾Ⴎൻ⃯⚛ࠍ᳇૕ߢ㧘ቯߥ෻ᔕߩ⛮⛯߇น⢻ߦߥࠆߣ⠨߃ࠄࠇࠆ‫ޕ‬੝㋦ࠍᶧ૕ߥ޿ߒ᳇૕ߣߒߡ෻ᔕߐߖࠆᣇ߇วℂ⊛ߢ޽ࠆࠃ߁⃻⁁ߩⵝ⟎ߦ߅޿ߡߪ㧘↢ᚑߔࠆ੝㋦ࠟࠬߩ᷷ᐲߪ੝㋦ߩᴣߦ⠨߃ࠄࠇࠆ‫ߒ߆ߒޕ‬ᣢߦ␜ߒߚࠃ߁ߦ 3)㧘ਇဋൻ෻ᔕߩߚ߼

ὐߢ޽ࠆ 910͠ࠍ௖߆ߦ਄࿁ࠆߣ⠨߃ࠄࠇࠆ‫ޕ‬྾Ⴎൻ⃯⚛ߩ⪭ߦ᳇⋧ߩಽሶᢙ߇ዋߥߊߥࠆߎߣ㧘߹ߚ྾Ⴎൻ⃯⚛ߩ⫳᳇࿶߇ਅὐ㧔੝㋦ߣߩ෻ᔕㇱಽ㧕ߩ෻ᔕ▤ߩ᷷ᐲߪ 1050͠ߢ೙ᓮࠍߒ

⇣Ᏹߦᄢ߈ߊߥࠆߎߣ㧘྾Ⴎൻ⃯⚛ߩಽ⸃෻ᔕߦࠃࠆᕆỗߥ࿶ߡ޿ࠆ߽ߩߩ㧘੝㋦ࠟࠬ⊒↢ኈེ߆ࠄߩ〒㔌߇⍴޿ߚ߼ߦ㧘੝ജ៊ᄬ߇⿠߈ࠆߎߣߥߤߦࠃࠅ㧘♽ߩ⽶࿶ൻ㧘ਇ቟ቯൻ߇↢ߓ㋦ࠟࠬ⥄りߩ᷷ᐲߪ੝㋦ߩᴣὐ᷷ᐲߣ޽߹ࠅᄌࠊࠄߕ㧘߹ߚ྾ࠆ‫ޕ‬྾Ⴎൻ⃯⚛ߩಽ࿶߇ᄢ߈ߊ㧘Ᏹ࿶ߦㄭ޿ㆇォߢߪචಽߥේႮൻ⃯⚛᷷ᐲߪቶ᷷ઃㄭߢ޽ࠆߩߢ㧘ታ㓙ߩ෻ᔕ᷷ᐲߪ෻ᔕ▤ᢱଏ⛎㊂ߩ⏕଻߇㔍ߒߊ㧘ߒߚ߇ߞߡⵝ⟎ኈⓍࠍᄢ߈ߊߢ߈ߥߩ೙ᓮ᷷ᐲࠃࠅ߽߆ߥࠅૐ޿ߣ⠨߃ࠄࠇࠆ‫ߩߎޕ‬ㇱಽߩ᷷ᐲࠍ޿‫ޕ‬ታ㓙㧘෻ᔕᮏౝ߇⽶࿶ߣߥߞߡᄢ᳇ࠍๆ޿ㄟߺ㧘↢ᚑߒߚ฽߻ฦ⒳ߩ೙ᓮ߽੹ᓟߩ⺖㗴ߢ޽ࠆ‫ޕ‬ታ㓙㧘੝㋦᷷ࠟࠬᐲઃㄭࠪ࡝ࠦࡦ߿ᧂ෻ᔕߩ੝㋦ࠟࠬ߇෻ᔕᮏౝߢ㉄ൻߔࠆ⃻⽎߇⿠߈ߢ↢ᚑߔࠆࠪ࡝ࠦࡦਛߦߪ௖߆ߢߪ޽ࠆ߇੝㋦ߩᷙ౉߇⹺߼ࠄࠆߎߣ߽޽ߞߚ‫ޕ‬ࠇࠆߎߣ߇޽ࠆ‫ߒߛߚޕ‬㧘ߎߩࠃ߁ߥ⁁ᴫߦ߅޿ߡ߽㧘੝㋦ߣߘߎߢᚒ‫ߪޘ‬ᴣὐߩૐ޿྾Ⴎൻ⃯⚛ࠍᶧ⁁ߩ߹߹㧘㜞᷷੝㋦྾Ⴎൻ⃯⚛ߩ෻ᔕߪ㕖Ᏹߦᣧߊ㧘ࠬࡓ࡯ࠬߦⴕࠊࠇߡ޿ࠆࠃ߁ࠟࠬਛߦଏ⛎ߔࠆᣇᴺࠍᬌ⸛ߒߚ‫ޕ‬྾Ⴎൻ⃯⚛ߩ᭽ߥૐᴣὐߩߦ⷗߃ࠆߎߣ߆ࠄ㧘ᧄ෻ᔕߩᦨㆡ᧦ઙ᏷ߪ߆ߥࠅᐢ޿ߣផቯߐᶧ૕ࠍ㜞᷷᳇૕ਛߦ౉ࠇߡ߽㧘⍍㑆⊛ߦࠟࠬൻߔࠆࠊߌߢߪߥࠇࠆ‫ޕ‬ߊ㧘ᶧṢ⴫㕙ߩ⫳⊒ߪ๟࿐ߩࠟࠬ߆ࠄᾲࠍᅓ޿㧘ᶧṢౝㇱߪ߹ߛ಄߃ߡ޿ߡ㧘ߘߩ߹߹ᶧ⁁ࠍ଻ߟ‫⴫ޕ‬㕙߇ើ⊒ߒߚᓟߪᰴߩ㧠 ↢ᚑߒߚࠪ࡝ࠦࡦ⹜ᢱᶧṢ⴫㕙߇ើ⊒ߔࠆߣ޿߁ౕวߦోߡ߇ើ⊒ߔࠆߦߪ޽ࠆ⒟ᐲᧄታ㛎ߢ↢ᚑߒߚࠪ࡝ࠦࡦߪ㧘ⶊ⦡ᓸ☳ᧃߣᚑ㐳ߒߚ㤥⦡ߩߩᤨ㑆ࠍⷐߔࠆ‫ߩߘޕ‬㑆ߦ੝㋦ߣߩ෻ᔕ߇ㅴࠎߢߒ߹߃߫㧘ߎࠪ࡝ࠦࡦߩᷙว‛߇ਥ૕ߢ޽ߞߚ‫⋥ုޕ‬෻ᔕ▤ߩ᷷ᐲ߇950͠ߩࠇ߇෩ኒߥᗧ๧ߢ᳇ᶧ෻ᔕᯏ᭴߆᳇૕ห჻ߩ෻ᔕᯏ᭴ߦߥࠆ߆႐วߦ߅ߌࠆ↢ᚑ‛ߩࠠࡖ࡜ࠢ࠲࡝࠯࡯࡚ࠪࡦࠍⴕߞߚ‫ౕޕ‬૕ุ߆ߪ೎ߣߒߡ㧘࿶ജᄌേࠍ߶ߣࠎߤ⿠ߎߔߎߣߥߊ㧘ࠪ࡝ࠦ⊛ߦߪ㧘᳓ᐔ෻ᔕ▤߅ࠃ߮ု⋥෻ᔕ▤ߩฦᚲߢណ㓸ߒߚࠪ࡝ࠦࡦࠍ↢ߓࠆߪߕߢ޽ࠆ‫ޕ‬ታ㓙㧘෻ᔕᮏߢߪ௖߆ߥᱜ࿶߇଻ߚࠇ㧘ࡦ⹜ᢱߦߟ޿ߡ☳ᧃ㨄✢࿁᛬᷹ቯࠍⴕ޿㧘⚿᥏⁁ᘒߩᄌൻࠍⷰߎࠇߦㄭ޿෻ᔕ߇⿠ߎߞߡ޿ࠆࠃ߁ߦᕁࠊࠇࠆ‫ߚ߹ޕ‬྾Ⴎൻ⃯ኤߒߚ‫ޕ‬ฦㇱಽ߆ࠄណ㓸ߒߚ↢ᚑ‛ߩ☳ᧃ㨄✢࿁᛬࿑ᒻࠍ࿑⚛ࠍᶧ૕ଏ⛎ߔࠆߣᄙ㊂ߩଏ⛎߽น⢻ߢ޽ࠆ‫ߩ⟎ⵝߪࠇߎޕ‬ዊߦ␜ߔ‫ޕ‬ဳൻߦ᦭೑ߢ޽ࠆ‫ޕ‬⠨߃ࠄࠇࠆ෻ᔕᯏ᭴ߣ੍ᗐߐࠇࠆ♽ౝߩࠟࠬ⚵ᚑਗ߮ߦߘߩ
࿶ജᄌൻࠍ࿑ 9 ߦ␜ߒߚ‫ޕ‬㧔ૉߒ㧘಴ญ஥߇⸃᡼♽ߦߥߞߡ޿ࠆᧄታ㛎ߢߪ㧘ታ㓙ߩ࿶ജߩᄌേߪ⿠ߎࠄߕ㧘ߘߩಽ߇ࠟࠬㅦᐲߩᄌൻߦߥࠆߣ⠨߃ࠄࠇࠆ‫ޕ‬㧕࿑ 10 ↢ᚑ‛ߩ☳ᧃ X ✢࿁᛬࿑ᒻ ߔߴߡߩ⹜ᢱߩ࿁᛬ࡄ࠲࡯ࡦߦߪࠪ࡝ࠦࡦߩᮡḰ࿁᛬ࡄ࠲࡯ࡦ߇฽߹ࠇ㧘⚿᥏ᕈࠪ࡝ࠦࡦ߇ਥᚑಽߢ޽ࠆߎߣ߇⏕⹺ߢ߈ߚ‫ޕ‬ߒ߆ߒ㧘ߘߩ߶߆ߦ㧘<QPGߢߪ㧘FΈ㧘F㧩Έ㧘࿑㧥 ෻ᔕ▤ਛߦ߅ߌࠆ෻ᔕࡕ࠺࡞ߣಽ࿶ᄌൻ

෸߮F㧩Έߦ᜛߇ߞߚࡊࡠࡈࠔࠗ࡞ࠍ߽ߟ࿁᛬✢߇⷗ࠄࠇߚ‫ߩߎޕ‬࿁᛬✢ߪ<QPG߆ࠄ<QPGߦ޿ߊߦᓥߞߡᒙߊߥ

ߎߩ෻ᔕᯏ᭴ࠍ઒ቯߒ㧘♽ౝߩࠪ࡝ࠦࡦ߅ࠃ߮྾Ⴎൻ⃯⚛ࠍߞߚ‫ޕ‬ታ㛎ࠍ➅ࠅ㄰ߒߡ߽ౣ⃻ᕈߩ޽ࠆߎߣ߆ࠄ㧘ߎߩࡉࡠ࡯ߘࠇߙࠇ࿕⋧߅ࠃ߮ᶧ⋧ߣߒߡ㒰ᄖߔࠆߣ㧘ࠟࠬ⋧ߢߪ 2Zn Î࠼ߥࡄ࠲࡯ࡦߪᩭ↢ᚑߒߚࠪ࡝ࠦࡦߩ⚿᥏ൻ߳⥋ࠆਛ㑆૕ߢߪ

2ZnCl2 ߥࠆဋൻ෻ᔕߩߺ߇ᱷࠆߎߣߦߥࠆ‫߽߆ߒޕ‬ห৻᷷ᐲߢߥ޿߆ߣ⠨߃ࠄࠇࠆ‫ߥ࠼࡯ࡠࡉޕ‬࿁᛬✢ߦߟ޿ߡࠪ࡝ࠦࡦߩේᲧセߔࠆߣ㧘੝㋦ࠃࠅႮൻ੝㋦ߩᣇ߇⫳᳇࿶߇㜞޿ߩߢ㧘♽ౝሶඨᓘࠍROߣߒߡ㧘㕙ᔃ┙ᣇᩰሶࠍ઒ቯߔࠆߣ㧘ߘߩ  ߪᱜ࿶ߣߥࠆ‫ޕ‬ᓥߞߡ♽ߣᄖ᳇ߣߩធ⸅߇৻ㇱߦ޽ߞߡ߽㧘ᄖ ෸߮  㕙㑆㓒ߦㄭ޿ᢙ୯ࠍ␜ߒߡ޿ࠆ‫ޕ‬ૉߒ㧘<QPG

―5―太陽電池用高純度シリコンの新しい製造法（V）

ߩ☳ᧃߩਛߦ੝㋦ߩ☸ߩࠃ߁ߥ‛߇ዋ㊂฽߹ࠇߡ޿ࠆߎߣ߆ࠄࠆߣ⠨ኤߒߚ‫ޕ‬෻ᔕㇱߩ᳇ᵹ⁁ᘒߪ቟ቯߒߡ߅ࠅ㧘ࠊߕ߆ߥᱜ਄ㅀߩࡉࡠ࡯࠼ߥࡄ࠲࡯ࡦߪ੝㋦ࠟࠬ߇྾Ⴎൻ⃯⚛ߩଏ⛎ߦᓥ࿶߇߆߆ࠆ⁁ᘒߢߩㅪ⛯෻ᔕߣᕁࠊࠇࠆ‫ߒ߆ߒޕ‬෻ᔕㇱߩ⌀ߩߞߡ౉ߞߡ߈ߚ㉄⚛ߣ෻ᔕߒ㧘↢ᚑߒߚ㉄ൻ੝㋦ߦࠃࠆߣ߽⠨᷷ᐲߥߤߦ߹ߛਇ᣿ߥὐ߇ᱷߞߡ߅ࠅ㧘↢ᚑࠪ࡝ࠦࡦߩᕈ⁁߽߃ࠄࠇࠆ‫⸃ߩߎޕ‬᣿ߪ੹ᓟߩ⺖㗴ߢ޽ࠆ‫ޕ‬ⵝ⟎ౝߩណ㓸႐ᚲߦࠃࠅ㆑޿߇⷗ࠄࠇߚ‫↢ޕ‬ᚑߒߚࠪ࡝ࠦࡦࠍ

࿑ߦ␜ߔࠃ߁ߦឃࠟࠬ▤ +PPGT'ZJCWUV ౝო߆ࠄណ㓸ߒߚ቟ቯ⊛ߦု⋥෻ᔕ▤ਅㇱߦၸⓍߐߖࠆߚ߼ߩⵝ⟎ࡄ࡜ࡔ࡯࠲ߦ

ࠨࡦࡊ࡞߽ࠪ࡝ࠦࡦ⚿᥏ߩ࿁᛬ࡄ࠲࡯ࡦࠍ␜ߒߡ޿ߚ‫ߎߩߎޕ‬ᦝߥࠆᬌ⸛߇ᔅⷐߢ޽ࠆ‫ߒ߆ߒޕ‬㧘ᧄᒰߦᄙ㊂ߩㅪ⛯วᚑⵝ⟎ߣ߆ࠄ㧘ᚑ㐳ߒߚࠪ࡝ࠦࡦߩ৻ㇱ߇ឃࠟࠬ▤ࠍㅢߞߡឃࠟࠬಣ

߇ታ⃻ߔࠇ߫㧘↢ᚑࠪ࡝ࠦࡦߪ⥄േ⊛ߦਅㇱလႂߦၸⓍߒߡ޿

ℂⵝ⟎ౝ߳౉ࠆߎߣ߇ࠊ߆ߞߚ‫⋥ုߪߚ߹ޕ‬ㇱಽߩო߆ࠄណข

ߊߣ੍ᗐߐࠇࠆߩߢ㧘ᧄ⾰⊛ߥ໧㗴ߣߪߥࠄߥ޿߆߽ߒࠇߥ޿‫ޕ‬ߒߚࠨࡦࡊ࡞ߪ᣿⍎ߥࠪ࡝ࠦࡦ⚿᥏ߩ࿁᛬ࡄ࠲࡯ࡦߩ߶߆ߦ㉄
ൻ੝㋦ߩ࿁᛬ࡄ࠲࡯ࡦߣ৻⥌ߔࠆࡇ࡯ࠢ߇⃻ࠇߚ‫⋥ုߪࠇߎޕ‬⻢ㄉ෻ᔕ▤ߩ᷷ᐲ߇950͠ߣૐ߆ߞߚߚ߼ߦ㧘ㆊ೾ߩ੝㋦ࠟࠬ߇ო߳

ోߡߩวᚑታ㛎ߪฬฎደᎿᬺᄢቇ࠮࡜ࡒ࠶ࠢࠬၮ⋚Ꮏቇ⎇ⓥᨆ಴ߔࠆߣߣ߽ߦ෻ᔕ▤ߦ౉ߞߡ޿ߚᓸ㊂ߩⓨ᳇ਛߩ㉄⚛ߣ෻࠮ࡦ࠲࡯ߦ߅޿ߡታᣉߐࠇߚ‫ޕ‬ታ㛎ⵝ⟎ߩ⵾૞‫ޔ‬ᢛ஻ߪหᛛⴚ

ᔕߒߡ↢ᚑߒߚ߽ߩߣ⠨߃ࠄࠇࠆ‫⋥ုޕ‬෻ᔕ▤ߩ᷷ᐲࠍ1000͠ኾ㐷⡯ຬߩ⨹ᧁⷙ᳁ߦᚻવߞߡ޿ߚߛ޿ߚ‫↢ߚ߹ޕ‬ᚑ‛ߩ X ✢ߦߒߡ߅ߎߥߞߚታ㛎ߩ⹜ᢱߦߟ޿ߡ߽ห᭽ߥಽᨆࠍⴕ߁ߎߣ㧘 ಽᨆߩ৻ㇱߪหᣣᲧ㊁ኼ᳁߇ⴕߞߚ‫ޕ‬෻ᔕႡߥߤߩࠪ࡝ࠞࠟ࡜
߅ࠃ߮ⵝ⟎ౝߦⓨ᳇߇౉ࠄߥ޿ࠃ߁ߦᎿᄦߔࠆᔅⷐ߇޽ࠆ‫ޕ‬ࠬ⵾ታ㛎ⵝ⟎ߩ⵾૞ߪࡑࠠࠪࡑᛛ⎇㧔౎₺ሶᏒ᣿␹↸ 4-2-7-206㧕
ߩ’ፉ㊂᳁߇ⴕߞߚ‫ߚ߹ޕ‬੝㋦ࡢࠗࡗ࡯ㅪ⛯ଏ⛎ⵝ⟎ߪࡑ࠶࠻㧡㧚߹ߣ߼࠴ࡖ࡯ࠗࡦ࠲࡯࠽࡚ࠪ࠽࡞ᩣᑼળ␠㧔ᮮᵿᏒਛ඙૑ศ↸ 6-68-1㧕྾Ⴎൻ⃯⚛ߩ੝㋦ㆶరᴺߦࠃࠆ⵾ㅧⵝ⟎ߦ੝㋦ࡢࠗࡗ࡯ߩㅪ
⛯ଏ⛎ⵝ⟎ࠍઃടߔࠆߎߣߦࠃࠅ㧘ࡃ࠶࠴ᑼߦⴕߞߡ޿ߚ੝㋦ᳰ↰㕏᳁߆ࠄឭଏࠍฃߌߚ‫ߢߎߎޔߚ߹ޕ‬ㅀߴࠄࠇߥ߆ߞߚᣇ‫ޘ‬߽฽߼‫ޔ‬ᓮදജࠍ㗂޿ߚᄙߊߩ⊝᭽ߦᗵ⻢޿ߚߒ߹ߔ‫ޕ‬ଏ⛎ࠍㅪ⛯ଏ⛎น⢻ߦߒߚ‫ޕ‬ᄖㇱ߆ࠄߩ੝㋦ࡢࠗࡗ࡯ߩଏ⛎ᤨߦ໧㗴ߣߥࠆᄖ᳇ߩๆ޿ㄟߺߪ㧘੝㋦ࡢࠗࡗ࡯ࠍ㐳޿ PTFE ▤ෳ⠨ᢥ₂ߦㅢߒ㧘੝㋦ଏ⛎ㇱ߳ߩࠊߕ߆ߥࠕ࡞ࠧࡦ㔓࿐᳇ࠟࠬࠍଏ⛎ߔ ፉቬቁਯ㧘⍹Ỉિᄦ㧦࠮࡜ࡒ࠶ࠢࠬၮ⋚Ꮏቇ⎇ⓥ࠮ࡦ࠲࡯ᐕ

ࠆߎߣߦࠃࠅ㧘߶߷ቢోߦ㒐ߋߎߣ߇ߢ߈ߚ‫ ߅ߥޕ‬PTFE ▤ਛߦ੝㋦ࡢࠗࡗ࡯ࠍㅢߔߎߣߦࠃࠆㅍࠅᛶ᛫ߩჇടߪ߶ߣࠎߤή

ႎ 8QN   ૒⮮⑲▸㧘ፉቬቁਯ㧘⍹Ỉિᄦ㧦࠮࡜ࡒ࠶ࠢࠬၮ⋚Ꮏቇ⎇ⓥ

ߊ㧘߹ߚ੝㋦ࡢࠗࡗ࡯ࠍᄢ᳇ਛߦߐࠄߔߎߣࠍᭂജㆱߌࠆߎߣ
߽ߣ߽ߢ߈ߚ‫ޕ‬྾Ⴎൻ⃯⚛ࠍᶧ૕⁁ᘒߢ෻ᔕᮏߦଏ⛎ߔࠆߎߣ࠮ࡦ࠲࡯ᐕႎ 8QN   ፉቬቁਯ㧘᭏ᄢ੺㧘⨹ᧁⷙ㧘⍹Ỉિᄦ㧦࠮࡜ࡒ࠶ࠢࠬၮ⋚ߦࠃࠅ㧘ᄙ㊂ߩේᢱࠍᛩ౉ߔࠆߎߣ߇಴᧪ࠆࠃ߁ߦߥߞߚ‫ߎޕ‬Ꮏቇ⎇ⓥ࠮ࡦ࠲࡯ᐕႎ 8QN  ࠇߪ㧘ዊဳߩⵝ⟎ߢᄙ㊂ߩ↢↥ࠍน⢻ߦߔࠆߚ߼ߩ⦟޿ᣇᴺߣ ፉቬቁਯ㧘⍹Ỉિᄦ㧘ᣣᲧ㊁ኼ㧘⨹ᧁⷙ㧦࠮࡜ࡒ࠶ࠢࠬၮ⋚ᕁࠊࠇࠆ‫ޕ‬੝㋦ࠍࠟࠬ⁁ߢ㧘߹ߚ྾Ⴎൻ⃯⚛ࠍᶧ⁁ߢଏ⛎ߔࠆᎿቇ⎇ⓥ࠮ࡦ࠲࡯ᐕႎ8QN  ߎߣߦࠃࠅ㧘᳇⋧ㇱಽߩ෻ᔕߪታ⾰⊛ߦ Zn ÎZnCl2 ߣߥߞߡ޿

―6―