FLA Series

FLA Series
Mass Airflow Sensors
Description
S’mate designed the FLA series of mass airflow sensors incorporate the latest MEMS and microelectronics innovations. The sensor die uses a pair ofthermopiles to detect changes in temperature gradient caused by mass flow, delivering ultra-low noiseto-signal, and unsurpassed repeatability. The “solidstate” thermal isolation on the sensor die eliminates
the need for surface cavities or fragile membranes,
used in competing solutions, making the sensor resistant to clogging and pressure shock. The sensor’s internal signal conditioning circuitry leverages
an off-the-shelf microcontroller, providing provenreliability and low cost.
The FLA series of mass airflow sensors covers theranges from 10 sccm to 10000 sccm. The sensors
are fully calibrated and compensated over the temperature range of 0 to 50 °C (32 to 122 °F). The linearized analog output (1 to 5 V) provides customers
with maximum flexibility and ease-of-use.
Bidirectional air flow versions are available uponrequest. Consult FactoryFeatures••••••

Applications••••••••••••Medical respirators and ventilators
Patient monitoring systems
Anesthesia delivery machines
Nebulizers
Oxygen concentrators
Sleep apnea machines
Ventricular assistance devices
Environmental monitoring
Analytical instrumentation
Gas leak detection
Filter monitoring and VAV systems in HVAC
Process Control

Sensormate Enterprise Co., Ltd.,10, Industries E. Rd. III, Lukang, Chang Hua
Taiwan 50544••

Unsurpassed performance in a robust andcost effective package
High accuracy and repeatability (2% F.S.
Max)
Linear output and temperature compensation
Long-term stability with minimal null drift“Solid state” sensing core (no surface cavity
or fragile membrane), resistant to clogging
and pressure shock
Analog output (1 to 5 V)
High sensitivity at very low flows
Fast response time (1 ms)

Absolute Maximum Ratings•••••

Operating Temperature: -25 °C to 85 °C
Storage Temperature: -40 °C to 90 °C
Humidity: 0 to 100% RH*
Shock 100 g peak (5 drops, 6 axis)
Common Mode Pressure 25 psi***Sensor is resistant to water condensation*Packaging with higher common model pressure rating is available

www.smate.com.tw / Tel: +8864 7811839

FLA Series
ELECTRICAL CHARACTERISTICS
Test Conditions: Vin=10±0.01VDC, Ta=25°C. Relative Humidity: 40%<RH<60%
Maximum Operating Temperature Range –25°C to +85°C
Flow Range
FLA101U-2210

0 .. 10SCCM

FLA301U-2210

0 .. 30

SCCM

FLA202U-2210

0 .. 200SCCM

FLA103U-2210

0 .. 1000

SCCM

FLA203U-2210

0 .. 2000

SCCM

FLA303U-2210

0 .. 3000

SCCM

FLA104U-2210

0 .. 10000

SCCM

PARAMETERS

MIN

MAX

UNIT

02000

SCCM

Analog Voltage Output 215VDC

Null Voltage3.95

1.05

VDC

Null Drift
Full Scale Voltage

TYP

10.2

4.94% / Year

5.00

Temperature Drift

VDC

4%0°C to +50°C
Full Scale

0.1%Load100KΩ

Accuracy4 (Full Scale)

1.52%Response Time

13mSec1014VDC

25mA

8Supply Current

21

Inrush Current 5
Wetted Materials

550

Full Scale

5.02

Repeatability

Supply Voltage

CONDITIONS

mA

Duration: 3 ms

Silicon carbide, Epoxy, PPS, FR4, Silicone as static seal

1. Custom ranges available between 10 and 10000 sccm
2. See Linear Output Flow Rate Calculation on Page 3
3. Null tolerance for FLA10U-2210 is ± 0.1V
4. Accuracy for FLA10U-2210 and FLA10U-2210 is 2.5% F.S. Max
5. A series resistance of 5 ohms on the source supply will reduce inrush current to under 250 mA (duration: 8 ms)

Sensormate Enterprise Co., Ltd.,10, Industries E. Rd. III, Lukang, Chang Hua
Taiwan 50544

2

www.smate.com.tw / Tel: +8864 7811839

FLA Series
Linear Output
Flow Rate = [(Vout - 1 V) / 4 V] x Full Scale Flow Rate
For example, using the FLA203U-2210 below, the device has a Full Scale Flow Rate of 2000 sccm.
When the Output Voltage reads 2.5V, the Flow Rate will be: [(2.5V-1V)/4V x 2000 sccm] =750 sccm

54.5Output Voltage (V)

4FLA203U-2210

3.5
32.5
21.5
10.5
00200

400

600

800

1000

1200

1400

1600

1800

2000

Flow Rate (sccm)

Sensormate Enterprise Co., Ltd.,10, Industries E. Rd. III, Lukang, Chang Hua
Taiwan 50544

3

www.smate.com.tw / Tel: +8864 7811839

FLA Series

Package Dimensions

Pin-out
1 Vout
2 Vcc
3 GND

123

Ordering Information
Part NumberSpecifications

FLA101U-2210

1 to 5 V, linear; 0 to 10 SCCM

FLA301U-2210

1 to 5 V, linear; 0 to 30 SCCM

FLA202U-2210

1 to 5 V, linear; 0 to 200 SCCM

FLA103U-2210

1 to 5 V, linear; 0 to 1000 SCCM

FLA203U-2210

1 to 5 V, linear; 0 to 2000 SCCM

FLA303U-2210

1 to 5 V, linear; 0 to 3000 SCCM

FLA104U-2210

1 to 5 V, linear; 0 to 10000 SCCM

Sensormate Enterprise Co., Ltd.,10, Industries E. Rd. III, Lukang, Chang Hua
Taiwan 50544

4

www.smate.com.tw / Tel: +8864 7811839