Honeywell ZephyrTM
Digital Airﬂow Sensors:
HAF Series–High Accuracy
10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM,
200 SLPM or 300 SLPM

DatasheetHoneywell ZephyrTM Digital Airﬂow Sensors
HAF Series - High Accuracy
Honeywell Zephyr™ HAF Series sensors provide a digital interface for reading airflow over specified full-scale flow andcompensated temperature ranges. The thermally isolated heater and temperature sensing elements help these sensors
provide a fast response to air or gas flow.
Zephyr sensors are designed to measure mass flow of air and other non-corrosive gases. Standard flow ranges are
10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM or 300 SLPM, with custom flow ranges available. The
sensors are fully calibrated and temperature compensated with an onboard Application Specific Integrated Circuit (ASIC).
The HAF Series >10 SLPM is compensated over the calibrated temperature range of 0 °C to 50 °C [32 °F to 122 °F]. The
state-of-the-art ASIC-based compensation provides digital (I2C) outputs with a response time of 1 ms.
These sensors operate on the heat transfer principle to measure mass airflow. They consist of a microbridge
Microelectronic and Microelectromechanical System (MEMS) with temperature-sensitive resistors deposited with thin filmsof platinum and silicon nitride. The MEMS sensing die is located in a precise and carefully designed airflow channel toprovide repeatable response to flow.
Zephyr sensors provide the customer with enhanced reliability, high accuracy, repeatable measurements and the ability
to customize sensor options to meet many specific application needs. The combination of rugged housings with a stable
substrate makes these products extremely robust. They are designed and manufactured according to ISO 9001 standards.

What makes our sensors better?
Precise measurement: The industry’s smallest
Total Error Band, fast response time, and highaccuracy provide precise measurement and highperformance in the customer’s application
plication
Saves time: Configurable and customizablestomizablewith a choice of port styles simplifies
fies design andreduces production time
Cost-effective: Reduces printed circuit board(PCB) size and overall design and production
costs

5*()5505"-&3303#"/%t)*()"$$63"$:t'"453&410/4&
2

sensing.honeywell.com

Featuresand Beneﬁts
Precise measurement maximizes performance.
TOTAL ERROR BAND (TEB)*
Honeywell specifies TEB, the most comprehensive, clear, and meaningfulmeasurement that provides the sensor’s true accuracy (see Figure 1). TEB allows
for precise airflow measurement, often ideal for demanding applications with highaccuracy requirements for precise airflow measurement.
 t 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM:– 0 %FS to 12.5 %FS = 0.5% FS– 12.5 %FS to 100 %FS = 4.0% readingt4-1.POMZ
– 0 SLPM to 199 SLPM = 0.5% FS or 4.0% reading– 200 SLPM to 300 SLPM = 7.0% reading
All Possible Errors
Offset+Full Scale Span+
Linearity=

Accuracy+
Flow Hysteresis

+

=

Total
Error Band

Repeatability+
Temperature Offset+
Temperature Span+
Thermal Hysteresis

Figure 1. Total Error Band vs. Accuracy
Other airflow sensor manufacturers only report on accuracy, while Honeywellreports Total Error Band.

HIGH ACCURACY
Ideal for use in demanding applications that require high accuracy.
 t 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM:– 0 %FS to 14.3 %FS = 0.5% FS– 14.3 %FS to 100 %FS = 3.5% reading t4-1.POMZ
– 0 %FS to 14.3 %FS = 0.5% FS– 14.6 %FS to 100 %FS = 3.5% reading*Competitive Differentiatorsensing.honeywell.com

3Featuresand Beneﬁts

FAST RESPONSE TIME (1 MS)
Allows the customer’s application to respond quickly to a change in airflow, importantin critical medical (e.g., anesthesia) and industrial (e.g., fume hood) applications.

HIGH STABILITY
Reduces errors due to thermal effects and null shift, providing accurate readings
over time and often eliminating the need for system calibration after PCB mount andperiodically over time.

HIGH SENSITIVITY AT VERY LOW FLOWS
Provides a fast response time at the onset or cessation of flow.

HIGH 12-BIT RESOLUTION
Increases the ability to sense small airflow changes, allowing customers to more
precisely control their application.

Simpliﬁes design and integration while reducing costs.
WIDE AIRFLOW RANGE*The industry’s broadest airflow range measures mass flow with standard flow rangesof 0-10 SLPM, 0-15 SLPM, 0-20 SLPM, 0-50 SLPM, 0-100 SLPM, 0-200 SLPM, and
0-300 SLPM, or custom flow ranges, increasing the options to integrate the sensor
into the application.

CHOICE OF PORT STYLES*Manifold mount, 22 mm OD tapered male fitting, and G 3/8 female threaded fitting
provide flexibility to choose the pneumatic connection that is best for the customer’s
application.

LINEAR OUTPUT*
Provides a more intuitive sensor signal than the raw output of basic airflow sensors,which can help reduce production costs, design, and implementation time.

WIDE SUPPLY VOLTAGE RANGE [3 VDC TO 10 VDC]
Flexible regulated power circuit allows the designer the flexibility to choose the supply
voltage that works best in the system.

ASIC-BASED I2C DIGITAL OUTPUT
Simplifies integration to microprocessors or microcontrollers, reducing PCB complexity
and component count.

FACTORY OR CUSTOM CALIBRATION FOR MULTIPLE GAS TYPESCan be factory calibrated for gas types such as dry air, helium (He), argon (Ar),
nitrogen (N2), nitrous oxide (N2O), and carbon dioxide (CO2), or custom calibrated forthe end customer, eliminating the need to implement gas correction factors.

ROHS-COMPLIANT MATERIALS
Meet Directive 2002/95/EC.

*Competitive Differentiator

4

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Potential Applications
MEDICAL
ANESTHESIA DELIVERY MACHINESVENTILATORSVENTRICULAR ASSIST DEVICES (HEART PUMPS)SPIROMETERSLAPAROSCOPY

INDUSTRIALANALYTIC INSTRUMENTATION (SPECTOMETRY, CHROMATOGRAPHY)
AIR-TO-FUEL RATIOFUEL CELLSFUME HOODSGAS LEAK DETECTIONPROCESS CONTROL GAS MONITORINGVACUUM PUMP MONITORING

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5

Honeywell ZephyrTM Digital Aiﬂow Sensors
HAF Series–High Accuracy
Table 1. Absolute Maximum Ratings1
Characteristic

Parameter

Supply voltage-0.3 Vdc to 11.0 Vdc

Voltage on digital I/O output pins

-0.3 Vdc to 3.0 Vdc2

Storage temperature range
Maximum flow change
Maximum common mode pressure
Maximum flow

-40 °C to 100 °C [-40 °F to 212 °F]
10,000 SLPM/s
60 psi at 25 °C [77 °F]
350 SLPM

1

Absolute maximum ratings are the extreme limits that the device will withstand without damage to the device. However, the electrical and mechanicalcharacteristics are not guaranteed as the maximum limits (above recommended operating conditions) are approached, nor will the device necessarily
operate at absolute maximum ratings.

2

Digital I/O pins are diode protected at this voltage up to 2 mA. Digital bus voltage may exceed this value if the maximum digital bus current is limited to
2 mA or less. The maximum bus current is generally determined by the bus pull-up resistors

CAUTIONCAUTION

IMPROPER USE

PRODUCT DAMAGE

Do not use these products to sense liquid ﬂow

Do not dissamble these products.

Failure to comply with these insturctions may result in productdamage.

Failure to comply with these insturctions may result in productdamage.

Table 2. Operating Specifications
Characteristic

Parameter

Supply voltage

3 Vdc to 10 Vdc

Supply current

20 mA max.

Power:
3 Vdc
10 Vdc

60 mW max.
200 mW max.

Calibrated temperature range1

0 °C to 50 °C [32 °F to 122 °F]

Operating temperature range-20 °C to 70 °C [-4 °F to 158 °F]

Full scale (FS) flow2

10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM,
200 SLPM, 300 SLPM

Calilbrated flow range

0 to 10 SLPM, 0 to 15 SLPM, 0 to 20 SLPM, 0 to 50 SLPM,
0 to 100 SLPM, 0 to 200 SLPM, 0 to 300 SLPM

Calibration gas3

clean, dry air

4

Accuracy
0 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM:
0 %FS to 14.3 %FS
14.3 %FS to 100 %FS
300 SLPM only:
0 %FS to 14.3 %FS (0 SLPM to 43 SLPM)
14.6 %FS to 100 %FS (44 SLPM to 300 SLPM)

6sensing.honeywell.com

0.5% FS
3.5% reading
0.5% FS
3.5% reading10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM or
300 SLPM
Table 3. Operating Specifications (continued)
Characteristic

Parameter
5

Total Error Band:

0 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM:
0 %FS to 12.5 %FS

0.5% FS

12.5 %FS to 100 %FS

4.0% reading

300 SLPM only:
0 %FS to 14.3 %FS (0 SLPM to 43 SLPM)

0.5% FS

14.6 %FS to 66.3 %FS (44 SLPM to 199 SLPM)

4.0% reading

66.6 %FS to 100 %FS (200 SLPM to 300 SLPM)

7.0% reading

Null accuracy6±0.5 %FS

Flow response time7

1 ms

Warm up time8

35 ms

Resolution:
10 SLPM
15 SLPM
20 SLPM
50 SLPM
100 SLPM
200 SLPM
300 SLPM

0.002 SLPM
0.003 SLPM
0.003 SLPM
0.008 SLPM
0.015 SLPM
0.020 SLPM
0.030 SLPM

Bus standards9

I2C fast mode (up to 400 kHz)

Proof pressure

150 psig

Burst Pressure

200 psig

Reverse polarity protectionno1

Custom and extended temperature compensated ranges are possible. Contact Honeywell for details.

2

Honeywell standard for mass flow rate units is SLPM, which has reference conditions of 0 °C and 1 atm. Custom units are given as LPM with listed
reference conditions at the first mention.
3

Contact Honeywell for requirements with other custom gases for calibration. See the Technical Note “Gas Media Compatibility and Correction Factors”.

4

Accuracy is the maximum deviation in output from nominal over the entire calibrated flow range at 25 ºC. Errors include Offset, Full Scale Span,
Linearity, Flow Hysteresis, and Repeatability. (See Figures 1 and 5.)5

Total Error Band (TEB) is the maximum deviation in output from nominal over the entire calibrated flow range and temperature range. Total Error Band
includes all Accuracy errors, as well as all temperature effects over the compensated temperature range, including Temperature Offset, Temperature
Span and Thermal Hysteresis. (See Figures 1 and 5.)
6

Null Accuracy is the maximum deviation in output from nominal at null flow over the entire calibrated temperature range.

7

Response time: time to electrically respond to any mass flow change at the microbridge airflow transducer (response time of the transducer may beaffected by the pneumatic interface).
8Warm-up time: time to the first valid flow measurement after power is applied.

9

Refer to the Technical Note “I2C Communications with Honeywell Digital Airflow Sensors” for I2C protocol information.

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Honeywell ZephyrTM Digital Aiﬂow Sensors
HAF Series–High Accuracy
Table 4. Compatible Gases
Gas

Calibration TypeDry air

standard

Helium (He)
Argon (Ar)
Nitrogen (N2)

optimized calibration available

Nitrous oxide (N2O)
Carbon dioxide (CO2)
Oxygen (O2)80/20 He/O2 Mix

See the Technical Note “Gas Media Compatibility and Correction Factors”.

Methane (CH4)
Xenon (Xe)Table 5. Environmental Specifications
Characteristic

Parameter

Humidity

0% to 95% RH, non-condensing

Shock

30 g, 6 ms

Vibration

1.33 g at 10 Hz to 500 Hz

ESDRadiated immunity:
test conditions for ≥20 SLPM
test conditions for ≤20 SLPM

ESD IEC6100-4-2 air discharge up to 8 kV, or direct contact discharge up to 4 kV
Level 3 from 80 MHz to 1000 MHz per IEC61000-4-3
1 meter shielded cable with 3 cm exposed leads at connector
1 meter shielded cable with 3 cm exposed leads at connector and 280 Ohm at 1 MHz ferrite bead

Table 6. Materials Specifications

8

Characteristic

Parameter

Wetted materials

glass reinforced (GR) thermoplastic polymer, gold, silicon, silicon dioxide, silicon nitride, epoxy,
PCB epoxy composite

Housing

GR thermoplastic polymer

Substrate

PCB

Adhesives

epoxyElectronic components

silicon, gold

Compliance

RoHS, WEEE

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10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM or
300 SLPM
Table 7. Recommended Mounting and Implementation
Characteristic

Parameter

Mounting screw size

10-32

Mounting screw torque1,13 N m [20 in-lb]

Electrical connection

6 pin SIP connector

Pneumatic connection

manifold mount, 22 mm OD tapered male fitting, G 3/8 female threaded fitting

Figure 2. Nomenclature and Order Guide1
For example, a HAFUHM0020L4AXT part number deﬁnes a Honeywell ZephyrTM Airﬂow Sensor, unidirectional ﬂow, long port, manifold mount, 20 SLPM, I2C output withcustom 0x49 address, 10% to 90% transfer function, 3 Vdc to 10 Vdc supply voltage.

HAF

U

HM

0020

L

4

A

X

T

Product Series

Flow
Direction

Port Style

Flow Range

Unit

Output Format

Transfer
Function

Reserved for
Future Use

Supply Voltage

A 10% to 90% of input

X XXXXXT 3 Vdc to 10 Vdc

HAF Series
high accuracy
airﬂow sensor

U Unidirectional

HM Manifold

0010 10L SLPM2

I C address:
2 Digital
0x29

mount

0015 15

I2C address:
3 Digital
0x39

22 mm OD
HH tapered maleﬁtting per
ISO 5356

0020 20

4 0x490050 50

I2C address:
5 Digital
0x59

G 3/8 female

0100 100

2
6 Digital I C address:

0200

2
7 Digital I C address:

HT threadedﬁtting per
ISO 1179

200

Digital I2C address:

0x69

0x79

0300 300
1Apart from the general configuration required, other customer-specific requirements are also possible. Please contact Honeywell.

Figure 3. All Available Standard Configurations

Manifold mount

22 mm OD tapered male ﬁtting

G 3/8 female threaded ﬁtting

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9

Honeywell ZephyrTM Digital Aiﬂow Sensors
HAF Series–High Accuracy
Figure 4. Nominal Digital Output: 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM, or 300 SLPM

Digital Output (counts)

18018
16380
14742
13104
11466
9828
8190
6552
4914
3276
1638
0
0

100

Full Scale Flow (%)

Figure 5. Accuracy and Total Error Band

10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM,
200 SLPM

300 SLPM only
8.00%
TEB =4. 67%
at 200 SLPM

7.00%

TEB = 7.00%
at 300 SLPM

6.00%
TEB= 2.65%
at 199 SLPM

4.00%

4.00%

3.00%

3.00%

2.00%

2.00%

Error (%FS)

Error (%FS)

5.00%

1.00%
0%
-1.00%

1.00%
0%-1.00%-2.00%-2.00%-3.00%-3.00%-4.00%
0

10

20

30

40

50

60

70

%FS

80

90 100

TEB = 0.5%
at 43 SLPM

-4.00%-5.00%

Ideal-6.00%

Accuracy
0 %FS to 14.3 %FS = 0.5%
14.3 %FS to 100 %FS = 3.5%

Total Error Band

-7.00%-8.00%
0

10

20

30

40

50

60

70

80

90 100%FS

0 %FS to 12.5 %FS = 0.5%

Ideal
Accuracy
0 %FS to 14.3 %FS (0 SLPM to 43 SLPM) = 0.5%
14.6 %FS to 100 %FS (44 SLPM to 300 SLPM) = 3.5%

Total Error Band
0 %FS to 14.3 %FS (0 SLPM to 43 SLPM) = 0.5%
14.6 %FS to 66.3 %FS (44 SLPM to 199 SLPM) = 4% reading
66.6 %FS to 100 %FS (200 SLPM to 300 SLPM) = 7% reading

10

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10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM or
300 SLPM
Figure 6. Flow vs Pressure Drop: 10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM, or 300 SLPM
Flow
(SLPM)

Pressure Drop (psi)N

3.00000
2.50000
2.00000
1.50000
1.00000
0.50000
0.00000
0

50

100

150 200 250
Flow (SLPM)

300

350

Typical Pressure Drop
mbar

psi

inH2O

0

0

0.00000

0.04153338

10.1034586

0.00150

0.04153338

20.20582424

0.00298

0.04153338

40.39645192

0.00575

0.04153338

80.80254866

0.01163

0.04153338

101.02721818

0.014890.04153338

12

1.27909578

0.018540.04153338

14

1.54899066

0.022450.04153338

15

1.68593772

0.024430.04153338

161.82026278

0.02638

0.04153338

18

2.12584308

0.030810.04153338

20

2.44420632

0.035420.04153338

25

3.32048838

0.048120.04153338

50

9.3139443

0.134983.73907619

75

17.55251808

0.13498

7.046445664

100

27.97855332

0.13498

11.23196996

125

40.53260928

0.13498

16.27178662

150

54.8812269

0.79538

22.03202877

175

71.15758308

1.0312728.5661601

200

89.5064674

1.2972035.93230649

225

109.3632281

1.5849743.90378866

250

131.0373825

1.8990952.60486225

275

154.388940

2.23752

61.97932838

300

179.2351535

2.5976171.95382248

Table 8. Ideal Transfer Function
Item

Equation

Digital Output Code

16384 * [0.1 + 0.8 * (Flow Applied/Full Scale Flow)]

Flow Applied

Full Scale Flow * [(Digital Output Code/16384) - 0.1]/0.8

Digital Interface
For additional details on the use of Zephyr with digital output see the Technical Note “I2C Communications with Honeywell Digital Airflow
Sensors”.
The sensor uses the I2C standard for digital communication with a slave address specified in the Nomenclature and Order Guide in Figure
2. Following sensor power-up, each of the first two read sequences shown in Figure 7 will respond with 2 bytes of the unique 4-byte Serial
Number. The first read after power-up will respond with the two most significant bytes of the Serial Number, while the second read will
respond with the two least significant bytes of the Serial Number. For reliable performance, allow sensor to be powered for the sensor
startup time before performing the first read, then allow a 10 ms command response time before performing the second read.

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11

Honeywell ZephyrTM Digital Aiﬂow Sensors
HAF Series–High Accuracy
Figure 7. Sensor I2C Read and Write Sequences

I2C Read: Slave responds to Master with data
Data Byte 0 (Most Significant)

SDA
SCL

Data Byte 1 (Least Significant)S A6 A5 A4 A3 A2 A1 A0 1 SA D7 D6 D5 D4 D3 D2 D1 D0 MA D7 D6 D5 D4 D3 D2 D1 D0 MN S

I2C Read: Master sends data to Slave
Command Byte

SDA
SCL

S A6 A5 A4 A3 A2 A1 A0 1 SA D7 D6 D5 D4 D3 D2 D1 D0 SA S

Bit

Name

Description

S

Start condition

Master pulls SDA from high to low while SCL remains highS

Stop condition

Master allows SDA to float from low to high while SCL remains highA6

Address bit

I2C Slave Address is the 7 Most Significant Bits for the first transmitted byte

1

Read/write bit

Read = 1, Write = 0

D7

Data bit

SA

Slave ACK

Slave pulls SDA low

MA

Master ACK

Master pulls SDA low

MN

Master NACK

Master allows SDA to float highAfter the power-up read sequence described above, the sensor will respond to each I2C read request with a 16-bit (2 byte) digital flow reading.
Read requests taken faster than the Response Time (1 ms) are not guaranteed to return fresh data. The first two bits of each flow reading will be‘00’, while non-flow responses (such as error and status codes) will begin with ‘11’. There are several user commands available as shown in Table
9. Following an I2C write sequence of a user command, the sensor will respond to the next I2C read request with a 16-bit response. Possible
responses to user commands can be seen in Table 10.
Table 9. User Command Descriptions
Command Byte
(Hexadecimal)

Command Name

Command Description

Command Response Time
(Max.)

0x01

GetSerialNumber

Next two read requests will each return two bytes of thesensor’s unique 4-byte Serial Number.

10 ms

0x02

PowerOnReset

Force Power-On reset of sensor microcontroller.

20 ms

ChecksumCalculates EEPROM Checksum and compares to
production Checksum value. If the values match, the next
read request will respond with 0xCCA5. Otherwise, thenext read will respond with 0xCC90.

1s

0x03

10

Table 10. Sensor Response Descriptions
Sensor Response(Hexadecimal)

Response Name

Response Description

0xCCA5POSACK

non-response command was executed successfully

0xCC99

BadCommand

command byte was not recognized

0xCC9A

BadParamcommand sent with incorrect parameter bytes

0xCC9B

Failurecommand failed during execution

0xCC90

BadChecksum

checksum did not match stored value

0xCCBBBusy

sensor is busy calculating the checksum value

The maximum sink current on SCL or SDA is 2 mA. Therefore, if the pull-up resistors are biased by VDD, and if VDD reaches the maximum
supply voltage of 6 V, then the pull-up resistors for SCL and SDA must be greater than 3.0 kΩ to limit the sink current to 2 mA. The typical value
for SCL and SDA pull-up resistors is 4.7 kΩ (this value depends on the bus capacitance and the bus speed).

12

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10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM or
300 SLPM
Figure 8. Mounting Dimensions (For reference only: mm [in].)

Port Style: Manifold Mount
Mounting Footprint

71,2[2.80]

8
[0.3]

55,2
[2.17]
30,0
[1.2]
14,6
[0.58]
A

16,0[0.63]

4X 5,60[0.220]4X 5,20[0.205]16,0[0.63]

71,2[2.80]
55,2[2.17]
30,6[1.20]

4X 15,0[0.59]

A

22,0[0.87]

54,4[2.14]

44,0
33,0 [1.73] 54,4
[1.30][2.14]

14,5 44,0[0.57] [1.73]

8
[0.3]
4,0
[0.16]

B

51,5[2.03]
54
[2.1]

34,5
[1.36]
33
[1.3]
42,4
[1.67]
22,0[0.87]
4,0[0.16]

2X 13,0 DIA.
[0.51]D87[3.4]

A Pin 1.

4X 4,50[0.177]

B 4X 10-32 pan head screws 1,13 N m [20 in-lb] torque.
C 2X Gland for O-Ring AS568-113, 13,94 mm ID x 2,62 mm[0.549 in ID x 0.103 in W. Two O-rings, AS568A-113 Durometer
A65 to A80 Silicon or Viton, are required to seal sensor to
manifold. O-rings are not included.

C

87
[3.4]

63,2
[2.49]

D Flow channel.

63,2[2.49]

Port Style: 22 mm OD Tapered Male Fitting per ISO 5356

14
[0.6]

39,5
[1.56]
18,3[0.72]

21,0[0.83]

2X 5,70[0.22]
14,8[0.58]A

Mounting Footprint

2X 5,20[0.205]14,5[0.57]

54,4[2.14]
44,0[1.73]

44,0
35,1 [1.73][1.38]
54,4[2.14]

2X 21,0[0.83]

C
18,0[0.71]

30
[1.2]
110
[4.3]

14,8
[0.58]
A

14,5[0.57]

B

68
[2.7]

39.5
[1.56]

14
[0.6]

35
[1.4]
42,4
[1.67]

54
51,5 [2.1][2.03]

2X 4,50[0.177]68[2.7]

2X 18,3[0.72]A Pin 1.
B 2X 10-32 pan head screws 1,13 N m [20 in-lb] torque.
C 15 mm ID/22 mm OD tapered fitting per ISO 5356.

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13

Honeywell ZephyrTM Digital Aiﬂow Sensors
HAF Series–High Accuracy
Figure 8. Mounting Dimensions (For reference only: mm [in], continued.)Port Style: G 3/8 Female Threaded Fitting per ISO 1179
16
[0.63]
2X 1,5[0.06]

Mounting Footprint

39,5[1.56]
2X 18,3[0.72]
2X 5,70[0.22]
14,8[0.58]
A

16[0.63]
2X 1.5[0.06]

2X 5,20[0.205]

B

71
[2.8]

C

18,0
[0.71]

30,0[1.18]
71,4[2.81]

44,0
35,1 [1.73][1.38]
54,4[2.14]

14,5[0.57]

44,0[1.73]
54,4
14,5[0.57] [2.14]

34,5[1.36]

39,5[1.56]
14,8[0.58]
A

51,5[2.03]A Pin 1.

54
[2.1]

B 2X 10-32 pan head screws 1,13 N m [20 in-lb] torque.
C ISO 1179 G3/8, recommended torque is 1,7 ±0,6 N m[15 ±5 in lb]. Electrical connector part number is JST(Japan Solderless Terminals) B6B-PH-K-S. Mating
connector part numbers are JST PHR-6 (socket) and
JST SPH-002T-P0.5L (crimp terminal).

2X 4,50[0.177]

35
[1.4]
42,4
[1.67]

2X 18,3[0.72]

Table 11. Pinout (Digital Function)

14

Pin 1

Pin 2

Pin 3

Pin 4

Pin 5

Pin 6

NC

SCL

VVDD

groundSDA

NC

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10 SLPM, 15 SLPM, 20 SLPM, 50 SLPM, 100 SLPM, 200 SLPM or
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ADDITIONAL INFORMATION
The following associated literature is available atsensing.honeywell.com:
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 t 5FDIOJDBM*OGPSNBUJPOWARNINGPERSONAL INJURY
DO NOT USE these products as safety or emergency stop
devices or in any other application where failure of the productcould result in personal injury.
Failure to comply with these instructions could result indeath or serious injury.

– I2C Communications with Honeywell Digital Airflow

WARNING

Sensors– Gas Media Compatibility and Correction Factors
 t %BUBTIFFUMISUSE OF DOCUMENTATIONt t "QQMJDBUJPO4QFDJGJD*OGPSNBUJPOt

5IFJOGPSNBUJPOQSFTFOUFEJOUIJTQSPEVDUTIFFUJTGPS
reference only. Do not use this document as a productinstallation guide.
$PNQMFUFJOTUBMMBUJPO PQFSBUJPO BOENBJOUFOBODF
information is provided in the instructions supplied witheach product.

Failure to comply with these instructions could result indeath or serious injury.

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