BQ Series
10kW

AC-HVDC POWER SUPPLIESThe BQ series of high voltage AC-DC power supplies offer a wide range of standard outputs
up to 100kV at 10kW with various output control options, input voltages, and low output
discharge currents that facilitate extremely simple integration into new systems.
Featuring low ripple and noise, air insulation and worldwide safety approvals, the BQ
series is specifically designed to address high voltage integration challenges in a wide
range of semiconductor manufacturing and industrial technology applications including ionimplantation, E-beam welding, E-beam additive manufacturing, and research applications.
Multiple units can used in parallel via the current share facility, providing higher power
solutions. Designed to ensure maximum flexibility, the BQ series can be easily adapted toApplications

customer specific requirements at this voltage and power level.

FeaturesIon Implant

High Power
E-beamIndustrialTechnologyResearch• Output voltages up to 100kV• 10kW output power, parallelable up to 50kW
• 0 to 100% programmable voltage and current• Local, analog and RS232/USB digital control, Ethernet optional

Dimensions
12.25” x 19.0” x 24.0” (311.2 x 482.6 x 609.6 mm)• 3 phase AC input 208VAC, 380VAC, 415VAC and 480VAC options available• Output voltage and current regulated• Voltage and current monitor outputs• Operating temperature: -20°C to +40°C, no derating• Short circuit, arc, overload, and thermal protection• Efficiency >80%
• Low ripple• CE marked for EMC, low voltage (LVD) and RoHS directives• 3-year warrantyBenefits• Custom capability and monitoring allow maximum flexibility and control• Air insulation makes the BQ series lightweight and easy to maintain• Arc sensing ensures safe operation providing maximum protection to the PSU, the load and the user
• High efficiency drives towards carbon neutral goals• Low cost of ownershipBQ Series

AC-HVDC POWER SUPPLIES

Models & Ratings
Model Number

Polarity

Output Voltage

BQ15P670

Positive0 to +15kV

BQ15N670

Negative0 to -15kV

BQ15R670

Reversible

0 to 15kV

BQ20P500

Positive0 to +20kV

BQ20N500

Negative0 to -20kV

BQ20R500

Reversible

0 to 20kV

BQ25P400

Positive0 to +25kV

BQ25N400

Negative0 to -25kV

BQ25R400

Reversible

0 to 25kV

BQ30P340

Positive0 to +30kV

BQ30N340

Negative0 to 30kV

BQ30R340

Reversible

0 to -30kV

BQ40P250

Positive0 to +40kV

BQ40N250

Negative0 to -40kV

BQ40R250

Reversible

0 to 40kV

BQ50P200

Positive0 to +50kV

BQ50N200

Negative0 to -50kV

BQ50R200

Reversible

0 to 50kV

BQ60P170

Positive0 to +60kV

BQ60N170

Negative0 to -860kV

BQ60R170

Reversible

0 to 60kV

BQ70P145

Positive0 to +70kV

BQ70N145Negative

0 to -70kV

BQ70R145

Reversible

0 to 70kV

BQ80P125

Positive0 to +80kV

BQ80N125

Negative0 to -80kV

BQ80R125

Reversible

0 to 80kV

BQ100P100

Positive0 to +100kV

BQ100N100

Negative0 to -100kV

BQ100R100

Reversible

0 to 100kV

Output Current

Max Stored Energy

0 - 670mA

13J

Output Cable
DS2124
DS2124
DS2124
DS2124

0 - 500mA

19J

DS2124
DS2124
DS2124

0 - 400mA

20J

DS2124
DS2124
DS21240 - 340mA

24J

DS2124
DS2124
DS21240 - 250mA

21J

DS2124
DS2124
DS21240 - 200mA

27J

DS2124
DS2124
DS21240 - 170mA

32J

DS2124
DS2124
DS21240 - 145mA

38J

DS2124
DS2124
DS21240 - 125mA

43J

DS2124
DS2124
DS21240 - 100mA60J

DS2124
DS2124

Options
SymbolDescription

200

180 to 220 VRMS, 3-phase input, 48-63 Hz, derate output current by 10%380342 to 440 VRMS, 3-phase input, 48-63 Hz

415-50370 to 460 VRMS, 3-phase input, 48-52 Hz

480-60430 to 530 VRMS, 3-phase input, 57-63 Hz

NCBlank front panel, AC power breaker/switch and indicator only

SSSlow start ramp. Specify standard times of 5, 10, 15, 20, or 30 seconds ±20%

ZR

Zero start interlock. Voltage control, local or remote, must be at zero before HV will enable.

K02

RS-232/USB/Ethernet control and monitor

Please consult factory for special requirements.

2BQ Series

AC-HVDC POWER SUPPLIES

InputCharacteristicMinimum

TypicalMaximum

Units

Notes & Conditions

Input Voltage

187

208

228

VAC

48-63Hz; 380VAC, 415VAC & 480VAC inputs optional

150

A

Inrush Current

IEC60320 C20 receptacle. AC power cord not included

Input Connector

Notes:
Mains service must be protected with fuses or circuit breakers with a maximum rating of 125A for 208VAC models and 100A for 380 through 480VAC models.

OutputCharacteristicMaximum

Units

Notes & Conditions

Output Voltage Range

Minimum0Typical100kV

See Models and Ratings

Output Current Range

100670mA

See Models and Ratings

Polarity

Available with either positive, negative or reversible polarity

Output Control

0 to rated voltage or current via rotary dials, analog or optional RS232, USB or ethernet

Line Regulation±0.005%±0.01

Load Regulation
Dynamic Voltage Regulation±0.02%For ±10% input line variation<70kV: of rated output for a no load to full load change>70kV: of rated output for a no load to full load change

For load transients from 10% to 99% and 99% to 10%, typical deviation is less than 2% of rated output voltage with recovery towithin 1% in 500µs and recovery to within 0.1% in 1ms.
0.01

Stability%/hr

0.05

After 30 min. warm up
Per 8 hours under constant conditions after 30 min. warm up

Temperature Coefficient

0.01%/°C

Voltage Rise/Decay
Time Constant

200ms

HV enable or remote programming control with a 6%
minimum load%+0.5V RMS at full load

0.05

Voltage Ripple
Arc Quench

An arc quench feature provides sensing of each load arc and quickly inhibits the HV output for approximately 20ms after each arc

Arc Count

Internal circuitry senses the number of arcs caused by external load discharges. If the rate of consecutive arcs exceeds
approximately one arc per second for five arcs, the supply will turn off for approximately five seconds to allow clearance of thefault. After this period, the supply will return automatically to the programmed output voltage value with the voltage rise time
constant indicated. If the load fault still exists, the above cycle will be repeated

HV Output Connection

Mating HV connector and 8ft (2.4m) shielded coaxial cable supplied. 25 pin D-306 miniature connector for computer interface
supplied

GeneralCharacteristic
Efficiency

Minimum

TypicalMaximum

80

Units

Notes & Conditions%

At full load

HV Insulating Medium

Air insulated

External Interlock

Open = off, closed = on. Normally latching except for blank front panel version where it is non-latching. Interlock LED is ‘ON’ wheninterlock is open

Remote HV Enable/Disable

0-1.5V = Off, 2.5-15V = On

Local HV Enable/Disable

HV output is permanently enabled

Voltage Accuracy

0.5% of setting + 0.2% of rated

Voltage Monitor

0 to +10V equivalent to 0 to rated voltage. Accuracy: 0.5% of reading +0.2% of rated. Impedance is 10KΩCurrent Monitor

0 to +10V equivalent to 0 to rated current. Accuracy: 1% of reading + 0.1% of rated. Impedance is 10KΩ

RS232/USB/Ethernet
Programming (Optional)

Resolution

0.025% of full scale for both the voltage and the current programs
0.1% of full scale for both the voltage and the current monitors

Remote setting accuracy

Voltage setting accuracy is better than 0.5% of setting +0.2% rated

Remote reading accuracy

Voltage reading accuracy is 0.5% of reading + 0.2% of rated
Current reading accuracy is 1% of reading + 0.1% of rated

Specifications subject to change without notice.

3

BQ Series

AC-HVDC POWER SUPPLIES

Environmental
Characteristic
Ambient Temperature

Minimum

TypicalMaximum

Units

Notes & Conditions-20+40°C

Operating-40+85°C

Storage

Cooling

Forced air coolingProtection

Automatic current regulation protects against all overloads, including arcs and short circuits. Thermal switches and rpm sensing
fans protect against thermal overload. Circuit breaker, fuses, surgelimiting resistors, and low energy components provide ultimate
protection.

RoHS

Restriction of the use of Hazardous Substances

EMC: Emissions
Standard

Test Level

Notes & Conditions

Conducted Emissions

Phenomenon

EN61000-6-4

Class ACISPER 11

Radiated Emissions

EN61000-6-4

Class ACISPER 11

Line Harmonics

EN61000-3-2Class A

EMC: Immunity
Phenomenon

Standard

Performance Criteria

ESD Immunity

EN61000-4-2

B

Radiated Immunity

EN61000-4-3

A

EFT/Burst

EN61000-4-4

BSurge

EN61000-4-5

BConducted

EN61000-4-6

A

Voltage Dips & Interruptions

EN61000-4-11

B&C

Standard

Test Level

Notes & Conditions

Safety Approvals
Safety Agency
EN

EN61010/IEC61010

CE

Meets all applicable directives

UKCA

Meets all applicable legislation-Notes & Conditions
Safety4

BQ Series

AC-HVDC POWER SUPPLIES

Mechanical Details

17.00(431.8)3.537(89.8)

8.437(214.3)1.281(32.5)Air Exhaust

24.00(609.6)

0.125
(3.2)

1.406(35.7)

HV On
InterlockIndicator
HV On
HV Oﬀ Indicator

Fault Polarity
Current
Indicator
Kilovolts

1.625(41.3)

Air Intake

3.000(76.2)

10 Turn
Voltage
Adjust1.818(46.2)

Kilovolts
Power OnIndicator

1.750(44.5)

Milliampere

2.250(57.2)

Main
Breaker

1.750(44.5)

10 Turn
Current
Adjust1.485(37.7)

12.287(312.1)

0.265 x 0.406(6.7 x 10.3)
Slot Typ.

18.344(465.9)
19.00(482.6)

Notes:
1. Dimensions are in inches (mm).
2. Weight: 88lbs (approx. 40kg)

3. For proper installation, it is recommended to mount equipment in a rackcabinet or bench top enclosure.

Specifications subject to change without notice.

51.485(37.7)

Master Driver Assembly

24.44(620.7)

Slave High Voltage Assembly

8.62(218.9)

Slave High Voltage Assembly

0.265 x 0.406(6.7 x10.3)
Slot Typ.

BQ Series

3.57(90.7)

AC-HVDC POWER SUPPLIES

Mechanical Details

Slave Driver Assembly

E2 1/4-20 UNC1.485
Ground Stud (37.7)

Slave Driver Assembly
E318.344
1/4-20 UNC(465.9)GroundStud

0.328
(8.3)

JHV5

A1W5

A1W4

W4 W5J61.406(35.7)
1.625 JHV2(41.3)

J324.00(609.6)

JHV3
JHV4W21.28(32.5)

W3

A1W3

A1W2

JHV1J6JHV5A2W8Air Intake

Air Exhaust

19.00(482.6)

Power On
Indicator

A1W1 HVE3

Air Exhaust

Air Intake
E2A1Master

J1

A2W5

J1Rear Panel
W6

E1

TB1

J6

JHV5

A2W6JF2

A2Slave

J3Function

JF1TB1JF1 to JF4 detail(for ﬁber optic cable installation)

A2W2
A2W3

Analog Interface - J1Function

E1 1/4-20 UNC
Ground StudS3TB2PinClinch NutExternal to Power Supply

Internal to Power Supply

A2W1 HVJ2Slave Interface(Optional)

E2Pin

TB2

E4A2W4

A2W7To ACMains

J2JF2 JF13TB2

J3To ACPinMains

MasterFunction

PinFunction

PinFunction

E1Earth Ground

J2

Slave Interface
Output1V Program
J18Common
E115Fault CommonLOAD

2JF2 JF1
I Program

9Common

16I Mode

3Signal Common

10

HV Status NO

17V Mode

E2Ground

J3/J6

Feedback Interface

4V Monitor

11

HV Status NC

18ModeCommon
UserSupplied

E3Load Return Ground

TB1Signal Interface

525Ground

E4GroundTB2

AC Input

6I Monitor
HVA3W6Enable

High Voltage ACJF1TX-A Output

7+10V Reference

JHV5

High Voltage Output

JF2TX-B Output

J1Signal Interface

JF4J2JF312
HV Status Common
A3W713 A3W8
Fault NO
14

Load Return

JHV1-JHV4

Fault NC

Connects to AdditionalJ3/J6

Pin

Function

Slave Units

PinFunction

HV to Next Chassis

Pin

Function

Slave(s) Typ.

Pin

Function

Pin

Function

8Interlock

15Thru 20 Reserved

E1

Earth GroundJ3/J6Feedback Interface

Fan -9Arc21

HV Return

E2GroundTB2

AC Input

Reserved10V Feedback -22

HV Return

E3Ground

JF1TX-A Output

4Reserved

11V Feedback +23Common

JHV1-JHV4

High Voltage AC

JF2TX-B Output

5Reserved

12I Feedback +24Common

JHV5

High Voltage Output

JF3RX-A Input

6Polarity

13

I Feedback -25GroundJ1Signal Interface Input

JF4RX-B Input

7Interlock

14Fan Sense

J2*Slave InterfaceOutput

1Fan +

23TB1
Pin

Function

Pin

Function

Pin

AC Input - TB2 (208/380/415/480VAC)

Function

1Interlock

5Remote HV Off

9I Local

PinPinFunction

2Interlock Return6

Remote HV Off

10I Local

1LineFunction

4Neutral (NC)3

Remote HV On

7

HV Enable Local

11V Local

2Line

5Ground

4

Remote HV On

8

HV Enable Local

12V Local

3Line

J2 - Slave interface output JHV1 thru JHV4 - Alden/Amphonol 108870 (shown)
JF1 - TX-A slave output
JHV5 - Amphenol 83-1R-RFX or equivalent
JF2 - TX-B slave output

Notes:
1. Dimensions are in inches (mm).
2. Weight: 88lbs (approx. 40kg)

3. For proper installation, it is recommended to mount equipment in a rackcabinet or bench top enclosure.

15 Mar 2023

6