The 8th Annual IEEE Inte
ernational Conference on
Nano/Micro Engineered and Molecular Systems

April 7-10, 2013
Suzhouu ChinaOrganizers & Sponsors
Institute of Electrical andChinese International NEMSElectronics Engineers

Society

National Natural Science

IEEE Nanotechnology Council

Foundation of China (NSFC)

Science and Technology on
Micro/Nanofabrication Laboratory

City University of Hongkong

Peking University

Soochow University

Nanopolis Suzhou

Science and Technology on
Microsystem Laboratory
CHINANOShanghai Institute of Microsystem
and Information Technology,
Chinese Academy of Sciences
Suzhou Institute of Nano-Tech andNano-Bionics(SINANO), Chinese

Suzhou Industrial Park (SIP)

Academy of Sciences

University of California, Los

MEMS Journal Inc.

Angeles,(UCLA), USA1

Table of Contents
Important Information.......................................................................................................................................................3
Welcome Message..............................................................................................................................................................4
Program at a Glance..........................................................................................................................................................5
Venue Floor Plan ...............................................................................................................................................................8
Technical Program Index................................................................................................................................................9
Conference Committee...................................................................................................................................................10
Conference Awards .........................................................................................................................................................14
Invited Speakers ..............................................................................................................................................................15
Technical Program...........................................................................................................................................................24
Day1: Monday, April 8 .................................................................................................................................................24
Opening Ceremony 1A1.......................................................................................................................................24
Plenary Session 1A2 ............................................................................................................................................24
Keynote Session 1A3 ...........................................................................................................................................24
Keynote Session 1A4 ...........................................................................................................................................25
Parallel Oral Session 1-1 (1B1/1C1/1D1/1E1)......................................................................................................25
Parallel Oral Session 1-2 (1B2/1C2/1D2/1E2)......................................................................................................30
Parallel Oral Session 1-3 (1B3/1C3/1D3/1E3)......................................................................................................34
Poster and Exhibition 1 (1P1-100) .......................................................................................................................60
Day2: Tuesday, April 9 .................................................................................................................................................39
Plenary Session 2A1 ............................................................................................................................................39
Keynote Session 2A2 ...........................................................................................................................................39
Keynote Session 2A3 ...........................................................................................................................................39
Parallel Oral Session 2-1 (2B1/2C1/2D1/2E1)......................................................................................................40
Parallel Oral Session 2-2 (2B2/2C2/2D2/2E2)......................................................................................................45
Poster and Exhibition 2 (2P1-103) .......................................................................................................................79
Day3: Wednesday, April 10 ..........................................................................................................................................50
Plenary Session 3A1 ............................................................................................................................................50
Keynote Session 3A2 ...........................................................................................................................................50
Keynote Session 3A3 ...........................................................................................................................................51
Parallel Oral Session 3-1 (3B1/3C1/3D1/3E1)......................................................................................................51
Parallel Oral Session 3-2 (3B2/3C2/3D2/3E2)......................................................................................................55
Conference Exhibitors...................................................................................................................................................99
Map&Direction...............................................................................................................................................................100
Hotel Information...........................................................................................................................................................102
Travel Information........................................................................................................................................................103
Technical Tour.................................................................................................................................................................104
Contact Information.......................................................................................................................................................105
MEMS Journal Inc. .......................................................................................................................................................106
Micro&Nano Letters ...........................................................................................................................................107
NEMS2014 CFP

2

Important Information
Registration
Day0: Sunday, April 7......................................................................................................................................... 14:30-19:30
Day1: Monday, April 8 ......................................................................................................................................... 8:30-18:00
Day2: Tuesday, April 9 ......................................................................................................................................... 8:30-18:00

Name Badges
All attendees must wear their name badges at all times to gain admission to all conference sessions, exhibitions,
receptions and other conference events.

Downloading and Turn in the Slides
For technical reasons, it is not possible to use your own computer for Oral Presentation. Laptop (PC with Microsoft
Windows), a laser pointer and microphone will be provided. You MUST COPY your presentation PPT to Conference
PC at the Secretary Room (M1) at least 4 hours before your presentation.
The following points are very important:Your PPT file should be submitted according to the session it belongs to. Every file collection desk has a signwith session numbers at Secretary Room (M1). Please be sure to submit your presentation at the rightcollection desk with your session number.
Please name your PPT file as your Paper Number (Paper ID).ppt, such as 1C2-1(356).ppt, and be sure your
PPT file is of Microsoft Office 2003 or 2007 Version. Please leave us your name and contact method (e.g.
hotel room number). If your file can not work well, we will contact with you.
If the videos imbedded in your PPT file can not be worked, please convert the videos format (such as .
avi, .mpg, .RMVB) into .WMV format.

Meeting Room Protocol
Every effort will be made to ensure that all sessions start and end on time. Speakers and attendees are asked to work
together to achieve this. This may mean having to cut short a valuable discussion; however, conference organizers
request your cooperation for the benefit of all attendees.

Journal Publication
For accepted abstracts, the full paper will be recommended to be published in Nanobiotechnology, Micro & Nano Letters
and Journal of Applied Science and Engineering after the conference. All submissions will be subject to the journal’s
regular peer-review procedures. For more details, please click their websites.
 IET Nanobiotechnology : SCI, 5-year Impact Factor - 2.3
 IET Micro & Nano Letters : SCI, 5-year Impact Factor - 1.06
 Journal of Applied Science and Engineering : EIInternet Service
There will be free wireless internet service provided by the Conference. The account is “worldhotel”, no Password.

3

Welcome Message
To the Participants of the 8th IEEE-NEMS conference,
Welcome to “Paradise on Earth” ---- Suzhou! Built in 514 BC, Suzhou is an ancient city with 2500 years’ history,
located in the center of Yangtze Delta. It is renowned for the classic gardens, canals, silks, lakes, operas, legends andmuseums. In recently 20 years’ fast-growing, Suzhou is changing her ancient face to a modern city and high-tech harbor,
its GPD ranks Top 5 in the cities of mainland China. Suzhou Industry Park (SIP) is becoming the new paradise ofHigh-Tech industries, attracts 30% of the Top 500 industries to set up base and over 14000 innovation companies fromall over the world. That’s why we chose Suzhou to host The 2013 IEEE International Conference on Nano/MicroEngineered and Molecular Systems (IEEE-NEMS 2013) from April 7-10, 2013.
IEEE NEMS conference is focused on progress in Micro-Nano-Molecular fields, will bring together leading
scholars and researchers world-wide to disseminate their most recent and advanced findings in relative areas. Based on
great efforts from all committee, IEEE-NEMS 2013 has received more than 500 submissions from over 30 countries andregions worldwide. Of these, we will arrange a 3 days program with 3 Plenary speech, 12 keynote speech, 33 invited
speech, 100 oral presentation and 203 posters. Also about 10 exhibitors will show their new production in our conference.
We offer all of you 3 gifts in these 3 exciting day,
1、 Top Plenary & Invited Speakers worldwide
2、 Frontier of Micro-Nano Science & Technologies
3、 Platform of Academy & Commercialization & Friendship
We would like to thank all participants of this conference for supporting the IEEE-NEMS conference series andfor becoming a part of this fast-growing high-tech community. In particular, we extend our thanks to the Technical
Program Committee members, who helped to review a large number of papers and finalized the program and best paper
candidates. Not only TPC, all of you, in technical, organizing, sponsoring or consulting, are the key factors to make thisconference successful. Thank all of you!
Finally, we hope you enjoy the IEEE-NEMS 2013 and your stay in Suzhou!

General Chair: Haixia(Alice) Zhang
Peking University, China

Co-Chair: Chang-Jin “CJ” Kim
University of California, Los
Angeles (UCLA), U.S.A.

4

Co-Chair: Lining Sun
SooChow University, China

Program at a Glance
Conference Venue: Dushu Lake Hotel http://www.ieee-nems2013.org

Day0: Sunday, April 7, 2013
14:30-19:00
18:00-20:00
20:00-21:30

Registration (Till April 9th 6pm in Registration Desk)
Welcome Reception
IEEE-NEMS Organizers and Speakers Dinner Meeting (by invitation only)

Day1: Monday, April 8, 2013
8:30-8:45

1A1 Opening Ceremony (Watson Auditorium)
Haixia (Alice) Zhang, Lining Sun, Yuelin Wang, Zheng Cui

8:45-9:30

1A2 Plenary Speaker 1: Dr. Jing Cheng (Watson Auditorium)
Chair: Haixia (Alice) Zhang

9:30-10:30

1A3 Keynote Speaker 1-2: Martin Wegener & Nicholas Xuanlai Fang
Chair: Zhihong Li & Osamu Tabata

Coffee Break and Exhibition

10:30-11:00
11:00-12:00

1A4 Keynote Speaker 3-4: Gilbert C. Walker & Wan-Lin Guo
Chair: Gobrecht Jens & Zheng Cui

Conference Lunch (Grand Ball Room)

12:00-13:00
13:00-14:15

1B1(Room F1)

Topic

Micro/nano Fabrication& Metrology 1

1C1(Room M2)
Nanomaterials 1

1D1(Room M3)

1E1(Room EIII)

Cross-Starit

Best Conference

Inivted Session 1

Paper

Chair

Xiaojing Zhang

Wendong Zhang

Zewen Liu

Gwobin Lee&Co-Chair& Weizheng Yuan

& Qiao Lin& Fangang Tseng& Lina Sarro

Paper ID

327, 285, 308, 326, 197

117,152,297,314,338

136,138,151,367

268,162,243,467,462

14:15-15:30

1B2(Room F1)

1C2(Romm M2)

1D2(Romm M3)

1E2(Room EIII)

Topic

Micro/nano Fabrication& Metrology 2

Nanomaterials 2

Cross-Starit
Inivted Session 2

Best Student Paper

Chair

Xiongying Ye

Wengang Wu

Chao-Min Cheng

Gwobin Lee&Co-Chair& Slaughter Gymama& Chengkuo Lee& Baoqin Chen

& Shanhong Xia

Paper ID

375, 341, 365, 336,504

356,439,478,491,497,544

273,307,298,392

281,283,351,453,165

5

15:30-15:45

Coffee Break and Exhibition

15:45-17:00

1B3(Romm F1)

1C3(Room M2)

1D3(Room M3)

1E3(Room EIII)

Topic

Micro/nano Fabrication

Carbon Nanotube &Cross-Starit Inivted

CM Ho Microfluidics& Metrology 3

Graphen-based-Device

Session 3

Award

Chair

Joan Bausells

Jianning Ding

Rong Zhu

Chihming Ho&Co-Chair& Shiyuan Liu& Bo Cui& Shikang Fan& Gwobin Lee

Paper ID

391,438,450,488,500,519

334,490,496,264,399,460

276,458,373,352

517,529,108,196,109

17:00-19:00

Poster and Exhibition 1 (1P, Room EII): Poster Number 1P1-1P100

Day2: Tuesday, April 9, 2013
8:30-9:15

2A1 Plenary Speaker 1: Dr. Albert (“Al”) P. Pisano (Watson Auditorium)
Chair: Zhaoying Zhou

9:15-10:15

2A2 Keynote Speaker 5-6: David R. S. Cumming & Isao Shimoyama
Chair: Tie Li & Juergen Brugger

Coffee Break and Exhibition

10:15-10:45
10:45-11:45

2A3 Keynote Speaker 7-8: Mark G. Allen & Hongbo Sun
Chair: Hans Zappe & Yao-Joe Yang

11:45-13:00

Conference Lunch (Grand Ball Room)

13:00-15:00

Poster and Exhibition 2 (2P, Room EII): Poster Number 2P1-2P103

15:00-16:30
Topic

2B1(Room F1)

2C1(Room M2)

2D1(Room M3)

2E1(Room EIII)
Flexible MEMS,

Micro/nano Sensors,

Nanobiology,

Cross-Starit

Actuators & Systems 1

Nano-bio-informatics 1

Inivted Session 4

Chair

Kean Aw

Yu-Cheng Lin

Linsen Chen

Haixiong Ge&Co-Chair& Qiangbin Wang

& Yi-Kuen Lee& Lungjie Yang

& Tingrui Pan

Paper ID

407,447,455,481,489,503,515

116,120,429,486,551,442,510

556,107,88,90,41140(IS-1), 502, 131,143,258

16:30-18:00

2B2(Room F1)

2C2(Room M2)

2D2(Room M3)

2E2(Room EIII)

Topic

Micro/nano Sensors,

Micro/Nano Heat Transfer &Cross-Starit

Micro/nanofluidics

Actuators & Systems 2

Energy Harvesters

Inivted Session 5&Bio Chips 1

Chair

Wibool&Co-Chair

Piyawattanametha& Tianling Ren

Paper ID

127,184,198,256,275,305

Sensors & Printed
Electronics 1

Lishuang Feng

Yu-Lin Wang

Tza-Huei Wang

& Chenyang Xue& Daoheng Sun& Yanyi Huang

443,325,330,339,421,424

557,463,555,54650(IS-2),110,147,167,246,252

6

18:30-21:00

Banquet (Grand Ball Room)

Day3: Wednesday, April 10, 2013
8:30-9:15

3A1 Plenary Speaker 3: Prof. Zhonglin Wang (Watson Auditorium)
Chair: Ning Xi

9:15-10:15

3A2 Keynote Speaker 9-10: Taesong Kim & Gwobin Lee
Chair: Wen J. Li & Kukjin Chun

10:15-10:45
10:45-11:45

Coffee Break and Exhibition
3A3 Keynote Speaker 11-12: Xinxin Li & Jianxin Wu
Chair: Fangang Tseng & Lining Sun

11:45-13:00
13:00-14:30
Topic

Conference Lunch (Grand Ball Room)
3B1(Room F1)
Nanomedicine

3C1(Room M2)

3D1(Room M3)

3E1(Room EIII)

Nanobiology,

Cross-Starit Inivted

Micro/nanofluidics&B

Nano-bio-informatics 2

Session 6

io Chips 2

Chair

Litao Sun

Xianting Ding

Yenwen Lu

Ting Zhang&Co-Chair& Wen Li& Che-Hsin Lin& Wenhao Huang& Junbo Wang

Paper ID

548(IS-3),370,190,319

148,369,474,507,401

176,245,182,435,194

204(IS-4), 277,294,332,387

14:30-15:30

3B2(Room F1)

3C2(Room M2)

3D2(Room M3)

3E2(Room EIII)

Topic

Micro/nano Sensors,

Integration &Cross-Starit Inivted

Flexi ble MEMS, Sensors

Actuators & Systems 3

Applicationof M/NEMS

Session 7

and Printed Electronics 2

Chair

Wenjiang Shen

Lianqing Liu

Da-Jeng Yao

Dong Sun&Co-Chair& Dongfang Wang

& Haidong Liu& Wei Wang

& ChengHsin Chuang

Paper ID

322,324,381,393

186,200,345,362,390

340,402,550

466,371,300,280,501

15:45-17:30
18:00-20:00

Technical Tour
Farewell Party

7

Venue Floor Plan

8

Technical Program Index
In the Technical Program, each paper has a unique number before the title, which clearly indicates when and where thepaper is presented.
Typical Oral Paper Number: 1C1-1• The first number (i.e., 1) indicates the presentation day of the conference:
1 = Day1(Monday) 2 = Day2(Tuesday) 3= Day3(Wednesday)• The second letter (i.e., C) indicates what session is being presented.
Session A Room: Watson Auditorium;
Session B Room: F1;
Session C Room: M2;
Session D Room: M3;
Session E Room: EIII
• The third number(i.e.,1) shows what period of the paper will be. There are three periods in Day1, two periods in
Day2 and Day3.
• The number after the short line (-) shows the number of the paper in the session in sequence starting at 1.
Typical Poster Paper Number: 1P-013• The first number (i.e., 1) indicates the presentation day of the conference:
1 = Day1 (Monday) 2 = Day2 (Tuesday)• The second letter (i.e., P) indicates what session is being presented, i.e., Poster and Exhibition session.
• The number after the short line (-) shows the number of the paper in the session in sequence starting at 1.
To assist you with finding the paper in the Technical Program, we have provided the Paper ID (such as 120, 148)
following each paper title.
Abbreviation & Presentation Time
Inivted Speakers: PS- Plenary Speaker(45min); KS- Keynote Speaker(30min);
IS-Invited Speaker(20min); CS- Cross-Starit Inivted Speaker(20min) .
Oral Presentations: Best Conference / Student Paper/CM Ho Award: 15min; Other Oral presentation: 12min.
Author: Copy Presentation PPT to conference computer 4hours before your session in Secretary Room (M1).
Posters: Poster Size: 90cm(width)*120cm(height), every poster should be showed by numbers on time:
Day1 Poster(1P1-1P100)：17:00-19:00 (Author: Put poster on before 17pm, and remove after 19pm).
Day2 Poster(2P1-2P103)：13:00-15:00 (Author: Put poster on before 13pm, and remove after 15pm).

9Conference Committee
IEEE NEMS2013 Committee
Honorary Chair: Zhaoying Zhou, Tsinghua University, China
General Chair: Haixia (Alice) Zhang, Peking University, China
Co-Chair: Chang-Jin "CJ" Kim, University of California, Los Angeles, (UCLA), USA
Co-Chair: Lining Sun, Soochow University, China
Technical Program Chair: Yuelin Wang, Shanghai Institute of Microsystem and information technology, CAS, China
Europe Co-Chair: Lina Sarro, Delft University of Technology, Netherlands

Gobrecht Jens, PSI, Switerland

Asia/Pacific Co-Chair: Wen J. Li, City University of Hongkong, Hongkong

Ryutaro Maeda, AIST, Japan

America Co-Chair: Yitshak Zohar, University of Arizona, USA

Yu Sun, Univ. Toronto, Canada

Organizing Chair: Zheng Cui, Suzhou Institute of Nanotech and Nanobionics, CAS
Co-Chair: Hans Zappe, IMTEK, Germany

Xijun Zhang, Suzhou Nanopolis, China

International Advisory Committee
Chair: Tzyh-Jong Tan, Washington University, USA
Members: Chihming Ho, University of California, Los Angeles, (UCLA), USA
Masayoshi Esashi, Tohoku University, Japan
Meyya Meyyappan, NASA AMES, USA
Nicolas F. de Rooij, EPFL, Switzerland
Toshio Fukuda, Nagoya University, JapanIEEE NEMS Steering Committee
Chair: Ning Xi, Michigan State University, USA
Members: Haixia( Alice) Zhang, Peking University, China
Daoheng Sun, Xiamen University, China
Wen J. Li, City University of Hongkong, Hongkong
Gwo-Bin Vincent Lee, National Tsing Hua University, Taiwan
Osamu Tabata, Kyoto University, Japan
Yu-ChongTai, California Institute of Technology, USA

10

Best-Paper-Award Committee
Chair: Gwo-Bin Vincent Lee, National Tsing Hua University, Taiwan
Co-Chair:Wen J. Li, HongKong City University, HK

Chihming. Ho, UCLA, USA

Shanhong Xia, Institute of Electronics, CAS, China

Hans Zappe, IMTEK, Germany

Lina Sarro, Delft University of Technology, Netherlands

Industrial and Commercialization Committee
Chair: Kurt Petersen, USA
Co-Chair: Lerwen Liu, Asian Nano Forum, Singapore

Yang Zhao, MEMSIC, China

Publications Committee
Chair: Zhihong Li, Peking University
Co-Chair: Zhidong Wang, Chiba Inst. of Technology, Japan
Jiwei Jiao, Shanghai Institute of Microsystem and information technology, CAS, China

Publicity Committee
Chair: Tie Li, Shanghai Institute of Microsystem and information technology, CAS, China
Co-Chair: Da-Jen Jeffrey Yao, National Tsing Hua University, Taiwan

Cross-Strait Micro-Nano Committee
Co-Chairs: Zewen Liu, Tsinghua University, China
Rong Zhu, Tsinghua University, China

Fangang Tseng, National Tsing Hua University, Taiwan
Shikang Fan, National Taiwan University, Taiwan

Local Scientific Program Committee
Co-Chairs: Jianbin Luo, Chair, Tsinghua University, China
Liwei Chen, Suzhou Institute of Nanotech and Nanobionics, CAS
Members: Bingheng Lu, Ming Liu, Changzhi Gu, Tielin Shi, Guobiao Wang

Local Supporting Team
Yiqing(Fiona) Wang, Yinghui Wei, Liguo Chen, Manman Jin, Dongyu Zhang, Huihui Yang, Clemson Lo

11

Technical Program Committee
Chair: Yuelin Wang, Shanghai Institute of Microsystem and information technology, CAS, China
Europe Co-Chair: Lina Sarro, Delft University of Technology, Netherlands

Gobrecht Jens, PSI, Switerland

Asia/Pacific Co-Chair: Wen J. Li, City University of Hongkong, Hongkong

Ryutaro Maeda, AIST, Japan

America Co-Chair: Yitshak Zohar, University of Arizona, USA

Yu Sun, U. Toronto, Canada

Members:
Fumihito Arai, Nagoya University, Japan

Markus Aspelmeyer, University of Vienna, Austria

KC AW, University of Auckland, Newzealand
Xinxia Cai,IE, CAS,China

Juergen Brugger, EPFL, Switzerland
Shuo Hung Chang, National Taiwan University, Taiwan

Shaochen Chen, UCSD, USA
Yong Chen, France
Sung Kwon Cho, University of Pittsburgh, USA

Kevin J. Chen, HKUST, Hongkong
Yu-Ting Cheng, National Chiao Tung University, Taiwan
Franck Chollet, FEMTO-ST Institute, France

Kunkjin Chun, Seoul National University, Korea Chang-Hwan Choi, Stevens Institute of Technology, USA
Bo Cui, Univ. of Waterloo, Canada
Maria Lucia Curri, Bari Division Italy, Italy
David Cumming, UK, University of Glasgow
Jurg Dual, ETH, Switzerland
Zachary J. Davis, DTU, Denmark
Shih-Kang Fan, National Jiao Tong University, Taiwan
Nicholas Xuanlai Fang, MIT, USA
Wanlin Guo, Nanhang University, China
Tony Huang, Penn State University, USA
Kazuo Hosokawa, RIKEN, Japan
Zhonghe Jin, Zhejiang University, China

Gary Fedder, CMU, USA
Dean Ho, Northwestern University, USA
David Horsley, Univ. of California, Davis, USA
Hongrui Jiang, University of Wisconsin-Madison, USA
Kyung Chun Kim, Pusan National Univ., Korea

Satoshi Konishi, Ritsumeikan Univ., Japan

Yong Jun Kim, Yonsei University, Korea

G.J.M. (Gijs) Krijnen, Holland
Qiao Lin, Columbia University, USA
Si-Hyung Lim, Kookmin University, Korea
Tie Li, CAS, China
Miao Lv, Xiamen University, China

Wen Li, MSU, USA
Jung Hoon Lee, Seoul National University, Korea
Shuichi Shoji, Waseda University, Japan
Zhihong Li, Peking University, China
Yu-Cheng Lin, National Cheng Kung Univ., Taiwan

Yiping Zhao, Univ. of Georgia, USA
Desheng Meng, Michigan Tech., USA
Liviu Nicu, LAAS-CNRS, France
Bradley Nelson, ETH, Switzerland
Je-Kyun Park, KAIST, Korea
Tingrui Pan, UC Davis, USA

Cheng-Hsien Liu, National Tsinghua Univ.,Taiwan
Ai Qun Liu, Nanyang Technological Univ., Singapore
Shiyuan Liu, Huazhong Univ. of Sci.& Tech., China
Che-Hsin Lin, National Sun Yat-sen Univ., Taiwan
Hyejin Moon, University of Texas, Arlington, USA
Shoji Maruo, Yokohama National University, Japan

12

Francesc Perez-Murano, Barcelona, Spain
Isao Shimoyama, Tokyo University, Japan

Guus Rijnders, University of Twente, Holland
Kahp-Yang Suh, Seoul National University, Korea

Litao Sun, Southeast University, China
Gymama Slaughter, Univ. of Maryland, USA
Aimin Song, University of Manchester, UK
Dong Sun, City Univ. of Hongkong, HK

Samuel Sia, Columbia Univ., USA
Terry Turney, Australia
Yu Sun, Univ. of Toronto, Canada
Hongbo Sun, Jilin University, China

Christoph Stampfer, Aachen, Germany
Bill Tang, UC Irvine, USA

Helmut Seidel, Sarrland University, Germany
Wenjiang Shen, Suzhou Institute of Nanotech, CAS, China

Tsuchiya Toshiyuki, Kyoto University, Japan
Everyln Wang, MIT, USA
Dongfang Wang, Ibaraki, Japan

Jeff Wang, Johns Hopkins University, USA
Fan-Gang Tseng, National TsingHua Univ., Taiwan
Pak Kin Wong, University of Arizona, USA

Ping Wang, Zhejiang University, China

Wei Wang, Peking University, China

Zheyao Wang, Tsinghua University, China
Piyawattanametha Wibool, Thailand
Martin Wegener, Univ. of Karlsruhe, Germany Wouter van der Wijngaart, Sweden
Wengang Wu, Peking University, China
Huikai Xie, Univ. Florida, USA
Lung-Jieh Yang, Tamkang University, Taiwan
Xiongying Ye, Tsinghua University, China
Jay Yeh, National TsingHua University, Taiwan Hirai Yoshikazu, Kyoto University, Japan
Da-Jeng Yao, National TsingHua Univ., Taiwan
Yao-Joe Yang, National Taiwan Univ., Taiwan
Hans Zappe, IMETK, Germany
Xiaojing Zhang, Univ. of Texas at Austin, USA
Jia Wei, Delft Univ. of Technology, Holland
Stella Pang, City University of Hongkong, HK

Kwang-Seok Yun, Sogang University, Korea
Darrin Young, Utah, USA
Edward Chow, UC San Francisco, USA
Frank Niklaus, KTH, Sweden
Gullo Maurizio, EPFL, Switzerland
Veronica Savu, EPFL, Switzerland

Philip Feng, Case Western Reserve Univ., USA
Zuankai Wang, City Univ. of Hong Kong, HK
S.M. Lee, Pohang Univ. of Sci. & Techn., Korea
Jianmin Miao, Nanyang Tech. Univ., Singapore
Qiangbin Wang, Suzhou Inst. of Nanotech, China
Yi-Kuen Lee, Hong Kong Univ. of Sci. & Tech., HK
Yung-Chun Lee, National Cheng Kung Univ., Taiwan
Mehran Mehregany, CASE Western Reserve Univ., USA
Yuji Miyahara, Tokyo Medical and Dental University, Japan
Weizheng Yuan, Northwest Univ. of Polytechnic Tech., China
Keisuke Morishima, Tokyo Univ. of Agriculture and Tech., Japan13

Conference Awards
Best Paper Award
IEEE-NEMS 2013 conference has the following four categories of conference awards:
1.

Best Conference Paper Award

2.

Best Student Paper Award

3.

CM HO Best Paper Award in Micro/Nano Fluidics

4.

Best Conference Poster Award

For any of these awards, factors to be considered in determining the winners are the significance of the new findings，
applications, technical merits, originality, potential impact on the field, and clarity of presentation. The awards winners
will be announced at the Conference Banquet and receive a Certificate and Cash Prize of US$ 300.

IEEE-NEMS 2013 Award Rules


Authors may nominate their original research work to enter the Awards Competition when they submit their
2-page abstracts. The TPC members nominate the Best Paper Candidates in their review process and Best Paper
Committee will decide the final list based on TPC nomination.



The Technical Program Co-Chairs who are responsible for handling the reviews of abstracts submitted to the“Microfluidics and Nanofluidics” category will nominate finalist papers to be considered for the CM HO Best
Paper in Micro/Nano Fluidics Award. Authors who are currently performing research in any labs/organizations
directed by Prof. Chih-Ming HO is NOT eligible to receive this award.

Best-Paper-Award Criteria
All the Award Committee Members are the judges for selecting the winner of the Best Paper Award, and they will attend
each presentation and evaluate each finalist’s performance according to the following evaluation criteria:(1) Originality, Technical strength and Presentation on the paper;(2) Oral/Poster presentation and Q&A performance at the conference.
(3) The oral/poster presentations of the finalist papers will be opened to all conference attendees.

14

Invited Speakers● Plenary Speakers

Jing Cheng
Jing Cheng, PhD, is a Cheung Kong Professor at Medical Systems Biology Research Center, Department of
Biomedical Engineering, Tsinghua University School of Medicine, Director of National Engineering ResearchCenter for Beijing Biochip Technology, Member of the Chinese Academy of Engineering.
Dr. Cheng received his B.Eng. degree in Electrical Engineering from Tongji University (China) and Ph.D.
degree in Forensic Sciences from the University of Strathclyde (UK). He gained additional postdoctoral
experience at the University of Strathclyde and the University of Aberdeen (UK) and the University ofPennsylvania (USA) where he was appointed as a Research Assistant Professor in the School of Medicine. In
1996 he joined Nanogen Inc in San Diego as a Staff Scientist /Engineer where he was later promoted to
Principal Scientist and Engineer, and Principal Investigator. From 1999 to 2001 he assumed the role of Chief
Technology Officer at Aviva Biosciences Corp in San Diego, USA. From 2000 to present, he is managing theover-all research as the director of National Engineering Research Center for Beijing Biochip Technology, andserves as CEO and CTO at CapitalBio Corporation in Beijing. He was awarded Nanogen's most prestigious
award NanoGrant in 1999, National Young Scientist Award in 2004, Qiushi Outstanding Youth Technology
Transfer Award in 2004, Second Prize of the National Awards for Technological Innovation in 2007, Ho Leung
Ho Lee Prize for Scientific and Technological Innovation in 2008 and Tanjiazhen Life Science Innovation
Award in 2008. Dr. Cheng has published 115 peer-reviewed papers and edited 8 books. In addition, he has
obtained 38 European and US patents. He has been an invited speaker to many international conferences. His
current interest is in the development of biochip-based microsystems for check-up and diagnostic use andultra-high throughput systems for drug screening.
Title: Translational Medicine: Microarrays, Microfluidics and Mobile Labs15

● Plenary Speakers

Albert ("Al") P. Pisano
Albert (“Al”) P. Pisano is a Director of the Berkeley Sensor & Actuator Center (BSAC) and has recently
completed 5-1/2 years as Professor and Chair of the Department of Mechanical Engineering at the University ofCalifornia at Berkeley. He was elected to the National Academy of Engineering in 2001. A member of theAmerican Society of Mechanical Engineers, he was elected to Fellow status in 2004. In MechanicalEngineering, Professor Pisano holds the FANUC Chair of Mechanical Systems, with a joint appointment to the
Department of Electrical Engineering and Computer Science. From 1997-1999, he served as Program Manager
for the MEMS program at the Defense Advanced Research Projects Agency (DARPA) in Arlington, VA, where
he expanded the MEMS research portfolio to 83 contracts awarded nationwide with a total MEMS researchexpenditure in excess of $168 million distributed over 3 fiscal years. His research interests and activities at UC
Berkeley include MEMS for a wide variety of applications, including harsh environment sensors systems.
Title: Harsh Environment MEMS for Energy & Power Applications: Single-Chip, Self-Powered, WirelessSensor Systems● Plenary Speakers

Zhonglin Wang
Zhonglin Wang received his PhD from Arizona State University in transmission electron microscopy. He now
is the Hightower Chair in Materials Science and Engineering, Regents' Professor, Engineering Distinguished
Professor and Director, Center for Nanostructure Characterization, at Georgia Tech. Dr. Wang has madeoriginal and innovative contributions to the synthesis, discovery, characterization and understanding offundamental physical properties of oxide nanobelts and nanowires, as well as applications of nanowires inenergy sciences, electronics, optoelectronics and biological science. His discovery and breakthroughs indeveloping nanogenerators establish the principle and technological road map for harvesting mechanical energy
from environment and biological systems for powering a personal electronics. His research on self-powered

16

nanosystems has inspired the worldwide effort in academia and industry for studying energy for
micro-nano-systems, which is now a distinct disciplinary in energy research and future sensor networks. He
coined and pioneered the field of piezotronics and piezo-phototronics by introducing piezoelectric potential
gated charge transport process in fabricating new electronic and optoelectronic devices. This breakthrough byredesign CMOS transistor has important applications in smart MEMS/NEMS, nanorobotics, human-electronics
interface and sensors. Dr. Wang’s publications have been cited for over 52,000 times. The H-index of his
citations is 110. Dr. Wang was elected as a foreign member of the Chinese Academy of Sciences in 2009,
member of European Academy of Sciences in 2002, fellow of American Physical Society in 2005, fellow of
AAAS in 2006, fellow of Materials Research Society in 2008, fellow of Microscopy Society of America in
2010, and fellow of the World Innovation Foundation in 2002. He is an honorable professor of over 10
universities in China and Europe. He received 2012 Edward Orton Memorial Lecture Award from American
Ceramic Society, 2011 MRS Medal from the Materials Research Society, 1999 Burton Medal from Microscopy
Society of America, 2001 S.T. Li prize for Outstanding Contribution in Nanoscience and Nanotechnology, andthe 2009 Purdy Award from American Ceramic Society. Details can be found at:
http://www.nanoscience.gatech.edu
Title: Piezotronics for smart MEMS and human-CMOS interfacing● Keynote Speakers

Martin Wegener
After completing his PhD in physics in 1987 at Johann Wolfgang Goethe-Universität Frankfurt (Germany), hespent two years as a postdoc at AT&T Bell Laboratories in Holmdel (U.S.A.). From 1990-1995 he was
C3-Professor at Universität Dortmund (Germany), since 1995 he is C4-Professor at Universität Karlsruhe (TH).
Since 2001 he has a joint appointment at Institut für Nanotechnologie of Forschungszentrum Karlsruhe GmbH.
Since 2001 he is also the coordinator of the DFG-Center for Functional Nanostructures (CFN) in Karlsruhe. His
research interests comprise ultrafast optics, (extreme) nonlinear optics, near-field optics, photonic crystals,
photonic metamaterials, and transformation optics. This research has led to various awards and honors, among17which are the Alfried Krupp von Bohlen und Halbach Research Award 1993, the Baden-Württemberg Teaching
Award 1998, the DFG Gottfried Wilhelm Leibniz Award 2000, the European Union René Descartes Prize 2005,
the Baden-Württemberg Research Award 2005, and the Carl Zeiss Research Award 2006. He is a member of
Leopoldina, the German Academy of Sciences (since 2006), Fellow of the Optical Society of America (since2008), Fellow of the Hector Foundation (since 2008), and Adjunct Professor at the Optical Sciences Center,
Tucson, U.S.A. (since 2009).
Title: Diffraction-unlimited three-dimensional optical lithography

Nicolas Xuanlai Fang
Professor Nicholas X. Fang received his BS and MS in physics from Nanjing University, and his PhD in
mechanical engineering from University of California Los Angeles. He arrived at MIT in Jan 2011 as an
associate professor in MechE. Prior to MIT, he worked as an assistant professor at the University of Illinois
Urbana-Champaign. Professor Fang’s areas of research look at nanophotonics and 3D nanomanufacturing. He is
an invited participant of the Frontiers of Engineering Conference by National Academies in 2010, a recipient of
the ICO prize from the International Commission of Optics (2011), the NSF CAREER Award (2009), theSociety of Manufacturing Engineering Outstanding Young Investigator Award (2009); MIT Technology
Review Magazine’s 35 Young Innovators Award (2008); and the ASME Pi Tau Sigma Gold Medal Award(2006).
Title: Folding Light with Photonic Metamaterials: Controllable Photon Trapping, Extraction and Optofluidic
assembly

Gilbert C. Walker
Gilbert C. Walker is the Canada Research Chair Professor of Molecular Microscopy and Nanophotonics in the
Department of Chemistry at the University of Toronto. He obtained his A.B. and Ph.D. degrees in Chemistry at
Bowdoin College and the University of Minnesota, respectively. His nanoscience research group is known for18

developing and applying scanning probe microscopy for the analysis of polymers. Biomaterials are a focus areaof his research, with a recent interest in how polymer elasticity affects tissue growth. In a series of papers
Walker has shown how the unstable mechanics of AFM tips may be used to measure the adhesive andviscoelastic properties of polymer surfaces. This work began during an effort to characterize anti-foulingpolymer surfaces for marine coatings. In addition, Walker’s group accomplished the first infrared spectroscopyof polymer surfaces at a spatial resolution below 100 nm.
Title: Novel Developments based on Atomic Force Microscopy

Wan-Lin Guo
Wanlin Guo, Ph.D. Cheng Kong Scholar, Chair Professor in mechanics and nanoscience, founder and directorof the Key Laboratory of Intelligent Nano Materials and Devices of the Ministry of Education and the Instituteof Nanoscience in Nanjing University of Aeronautics and Astronautics. He has worked on three-dimensional
fracture mechanics and life-cycle design of mechanical structures for over 25 years. His research interest since2000 is focusing on intelligent nano materials and devices, nanotechnology for efficient energy conversion,
bio-channels and molecular bionics. He has published more than 300 journal papers on Phys. Rev. Lett., J. Am.
Chem. Soc., Nano Lett., Adv. Mater., Phys. Rev. B., Appl. Phys. Lett., ACS Nano., J. Phys. Chem. Lett., J.
Mech. Phys. Solids, J. Plasticity, Int. J. Solids Struct. etc. He services as reviewers of more than fifty journals
include Account Chem. Res., Phys. Rev. Lett., J. Am. Chem. Soc., Nano Lett., etc.
Title: Advances and Challenges in Graphene Based Devices

David CummingDavid R. S. Cumming has B.Eng (Glasgow, 1989) and PhD (Cambridge, 1993) degrees. He has worked
variously on mesoscopic device physics, RF characterization of novel devices, fabrication of diffractive optics
for optical and sub-millimeter wave applications and microelectronic design. He is presently Professor of
Microsystem Technology and EPSRC Advanced Research Fellow in Electronics and Electrical Engineering at

19

the University of Glasgow, U.K. where he leads the Microsystem Technology Group.
Title: CMOS Integration for sensing

Isao Shimoyama
Isao Shimoyama received the B.E., M.E, and Dr. of Engineering degrees in mechanical engineering from The
University of Tokyo in 1977, 1979, and 1982, respectively. He joined The University of Tokyo in 1982 and ispresently Professor, Director of Information and Robot Technology Research Initiative. His current Researchinterest is in Robotics, MEMS and nano-on -microsystems.
Title: Folding Light with Photonic Metamaterials: Controllable Photon Trapping, Extraction and Optofluidic
assembly

Mark Allen
Dr. Mark G. Allen received the B.A. degree in Chemistry, the B.S.E. degree in Chemical Engineering, and the
B.S.E. degree in Electrical Engineering from the University of Pennsylvania, and the S.M. and Ph.D. (1989)
from the Massachusetts Institute of Technology. In 1989, he joined the faculty of the School of Electrical andComputer Engineering of the Georgia Institute of Technology, where he currently holds the rank of Regents'
Professor and the J.M. Pettit Professorship in Microelectronics. His current research interests are in the field of
microfabrication and nanofabrication technology, with emphasis on new approaches to fabricate devices withcharacteristic lengths in the micro- to nanoscale from both silicon and non-silicon materials. Professor Allen
was the co-chair of the 1996 IEEE/ASME Microelectromechanical Systems Conference and the 2012 PowerMEMS conference. He is also co-founder of two MEMS-oriented companies, CardioMEMS and Axion
Biosystems. He is a Fellow of the IEEE.
Title: An Electroplating-Based Approach to Volumetric Nanomanufacturing And Its Application to Energy
Conversion and Storage

20

Hong-Bo Sun
Hong-Bo Sun received the B.S. and the Ph.D. degrees in electronics from Jilin University, Jilin, China, in 1992
and 1996, respectively. He worked as a postdoctoral researcher in Satellite Venture Business Laboratory, theUniversity of Tokushima, Japan, from 1996 to 2000, and then as an assistant professor in Department ofApplied Physics, Osaka University, Osaka, Japan. In 2005, he was promoted as a full professor (Changjiang
Scholar) in Jilin University, China. His research interests have been laser nanofabrication and ultrafast
spectroscopy: Fabrication of various micro-optical, microelectronical, micromechanical, microoptoelectronic,
microfluidic components and integrated systems at nanoscales, and exploring ultrafast dynamics of photons,
electrons, phonons, and surface plasmons in solar cells, organic light-emitting devices and low-dimensional
quantum systems at femtosecond timescale. So far, he has published nearly 150 scientific papers in the above
fields, which have been cited nearly 5000 times according to ISI search report.
Title: Nano-micro-engineered polymers for advanced applications

Tae Song Kim
In 1993, Tae Song Kim received the Ph.D degree in department of material science and engineering at Korea
Advanced Institute of Science and Technology (KAIST). In 1994, he joined as a senior researcher in Korea
Institute of Science and Technology (KIST), and since 2000, he is principal researcher in KIST. He also spent
his postdoctoral associate position in department of electrical engineering and computer science at University of
Minnesota, USA from 1997 to 1998. He was director of microsystem research center in KIST from 2000 to
2004, and then he served as a director of intelligent microsystem center (IMC) from 1994 to 2010, which was
one of the 21st century frontier R&D program sponsored by Ministry of Commerce, Industry & Energy(MOCIE). Since 2005, he is also Professor in department of micro nano system engineering in University of
Science and Technology(UST).
Dr. Kim also served as a chairman of MicroTAS 2009 in Jeju, Korea. He is a member of board of director in21

Chemical and Biological Microsystem Society (CBMS). He also served as a President of Korea biochip society
in 2011 and of Micro Nano systems society in 2012. He received several award: Excellent Research Award
from Korea Research Council of Fundamental Science & Technology, Prime minister Award, Excellent
Research Award, Chung Jin-Ki Media and Culture Foundation, and Young Engineer Award, The National
Academy of Engineering of Korea.
His research interests are MEMS based diagnostic system, BioMEMS, Biosensors/Chip and piezoelectric
MEMS devices. He also has research interest in the area of Biomimetic microfabrication.
Title: Molecular based detection using piezoelectric thin film coated microcantilever

Gwo-Bin Vincent Lee
Gwo-Bin Lee received his B.S. and M.S. degrees in Department of Mechanical Engineering from National
Taiwan University in 1989 and 1991, respectively. He received his Ph.D. in Mechanical & Aerospace
Engineering from University of California, Los Angeles, USA in 1998. Dr. Gwo-Bin Lee was a Distinguished
Professor in the Department of Engineering Science at National Cheng Kung University. Currently, he is aDistinguished Professor in the Department of Power Mechanical Engineering at National Tsing Hua University.
His research interests are on nano-biotechnology, micro/nanofluidics and their biomedical applications. He is
the directors of “MEMS Design and Microfabrication Lab” and “Microfluidics Biochip Lab”. Dr. Lee has been
active in the field of micro/nanofluidic systems, and is developing integrated micro/nano systems incorporated
with nano/biotechnology for biomedical applications. He has developed several micro/nano-scale platforms forcell, protein, and DNA manipulation and detection. Dr. Lee has published over 180 SCI journal papers,
460conference papers, and filed 102 patents (50 patents granted). His works have been highly cited over 3000
times in the past ten years. He has received many important several academic awards. Such as, Excellent
Research Award from National Science Council in Taiwan (2007, 2011), National Innovation Award (2008),
Distinguished Engineering Professor Award from Chinese Engineering Society (2009), Distinguished Kuo-Ting
Lee Researcher Award from Kuo-Ting Lee Foundation (2009).
Title: Optically-induced dielectrophoresis (ODEP) on microfluidic systems for biomedical/nanotechnology
applications

22

Xinxin Li
Prof. Xinxin Li received the B.S. degree in semiconductor physics and devices from Tsinghua University,
Beijing, China, in 1987. From 2001 to now, he has been a professor and now serves as the Director of the StateKey Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese
Academy of Sciences. He is also serving as Adjunct Professor in both Fudan University and Shanghai Jiaotong
University now. Prof. Li was granted the National Science Fund for Distinguished Young Scholar in 2007. He
is the laureate of the Chinese National Award for Technological Invention and the Shanghai Award forTechnological Invention. He has invented more than 70 patents and published more than 200 papers in referredjournals and academic conferences (including about 130 SCI journal papers). He has served as TPC members,
respectively, for IEEE MEMS, Transducers and IEEE International Conference on Sensors. He is the editorial
board member for Journal of Micromechanics and Microengineering. He has been invited to present invited
talks in numerous international conferences and write topic-review papers for international journals.
Title: Efforts on the two interfaces of resonant-cantilever for ultra-sensitive bio/chemical sensing

Jianxin Wu
Mr. Jianxin (Jacky) Wu joined Suzhou Industrial Park Administrative Committee (SIPAC) in 2002 andcurrently serves as the Deputy Director of Suzhou Industrial Park Sci. & Tech. Development Center and also
the Executive Vice President of Suzhou Nanotech Co., Ltd., the General Manager of CHInano Investments Co.,
Ltd. He has rich experience on investment promotion for WFOE, overseas high-tech experts and companies toestablish collaboration and presence in SIP. He and his team have attracted over 100 nanotech companies(including some of the top nanotech companies in SIP such as Halation, Polynova, CUPM, Longpowers, etc.)
and 2500 high-tech experts/entrepreneurs to settle in SIP and provided them strategic and comprehensive
support/services especially in the industry areas of LED, MEMS, GaN, Laser, Functional Nano Materials, etc.
Title: Suzhou Industry Park Overview and Nanopolis Suzhou

23

Technical Program
Day1: Monday, April 8, 2013
8:30-8:45

1A1

Opening Ceremony (Watson Auditorium)
Haixia (Alice) Zhang, Lining Sun, Yuelin Wang, Zheng Cui

8:45-9:30

1A2

Plenary Speaker 1: Dr. Jing Cheng (Watson Auditorium)
Chair: Haixia (Alice) Zhang(1A2-PS-1) TRANSLATIONAL MEDICIN E: MICROARRAYS, MICROFLUIDICS AND MOB ILE LABS ……………No.1
Jing Cheng
Medical Systems Biology Research Center, Department of Biomedical Engineering, Tsinghua University School of Medicine,
Director of National Engineering Research Center for Beijing Biochip Technology, China
With accomplishment of the human genome project, more and more genomic and proteomic information were used for clinical diagnosis. A variety ofbiochip technology is thereby emerging for massive information analysis and lays the foundation of molecular typing for the coming 3P medicine era.
For sample preparation, rapid and effective isolation of cells and molecules from body fluids can be achieved on chip either mechanically orelectronically. This is the first step before the following biochemical reactions taking place. For the chip-based amplifications, in addition to the wellknown thermal cycling amplification technology PCR, there are a variety of distinctive isothermal amplification technologies, such as strand
displacement amplification (SDA) and loop-mediated isothermal amplification (LAMP). Among these technologies, some are suitable for DNA testingand some for RNA detection; some are suitable for laboratory analysis and some for field analysis. There are a variety of biological analysis technologies
using micro particles as carriers, such as the microbeads encoded with multicolor fluorescence, the micro-columns generated by laser holography, andthe micro disks fabricated with optical lithography. All these technologies allow for future analysis with a great flexibility and rich imagination. For
separation-based detection technology, there are plenty of methods are available including the high-performance liquid chromatography-chip(HPLC-chip), capillary electrophoresis and chip-time-of-flight mass spectrometry (chip-TOF M S). Additionally, a lot of high-density microarrays havebeen utilized for the discovery of disease-related biomarkers, including single-nucleotide polymorphism (SNP) array, mutation detection array,
array-comparative genomic hybridization, methylation profiling array, mRNA expression array, miRNA microarray, transcription factor array, promoter
array, protein array and peptide array, etc. Some low to medium density microarrays have also been developed for individual treatment and applied inclinical laboratories, including the hereditary deafness gene mutation detection chip, mycobacterium tuberculosis drug resistance detection chip,
food-borne pathogenic microorganism detection chip and protein chips for autoimmune disease diagnosis. In the future, biochip technology in different
forms, from microarray, microfluidic chip to the lab-on-a-chip system, will be more extensively applied in the disease prevention and intervention,individual diagnosis and prognosis.

9:30-10:00

1A3

Keynote Speaker 1: Martin Wegener (Watson Auditorium)
Chair: Zhihong Li & Osamu Tabata(1A3-KS-1) DIFFRACTION-UNLIMIT ED THREE-DIMENS IONAL OPTICAL LITHOGRAPHY……………………No.26
M. Wegener
Institute of Applied Physics, Institute of Nanotechnology, DFG-Center for Functional Nanostructures (CFN),Karlsruhe Institute ofTechnology (KIT), 76128 Karlsruhe, Germany
Electron-beam lithography is a workhorse of nano- and microfabrication. It offers excellent spatial resolution, but it is essentially a two-dimensional
technology. For many applications, a truly three-dimensional lithography approach would be highly desirable. Direct laser writing (DLW) opticallithography can be seen as the three-dimensional (3D) counterpart of electron-beam lithography. Over the last decade, 3D-DLW has matured from alaboratory curiosity to a commercially available, reliable, and versatile workhorse (see,e.g.,www.nanoscribe.de). However, it seemed as if the Abbe
diffraction barrier would fundamentally limit the accessible spatial resolution. Recent work on stimulated-emission-depletion (STED) based 3D-DLW
has overcome this barrier. Furthermore, another seemingly fundamental barrier, namely that regarding the accessible overall sample height has also been
overcome by introducing 3D “dip-in” DLW, which can potentially be combined with 3D-STED-DLW. In this keynote talk, we give an introduction andreview the current state-of-the-art of the field.

10:00-10:30 1A3

Keynote Speaker 2: Nicholas Xuanlai Fang (Watson Auditorium)
Chair: Zhihong Li & Osamu Tabata(1A3-KS-2) FOLDING LIGHT WITH PHOTONIC METAMATERIALS: CONTROLLAB LE PHOTON TRAPPING,EXTRACTION AND OPTOFLUIDIC ASS EMB LY …………………………………………………………………………No.27
Nicholas Xuanlai Fang
Department of Mechanical Engineering, Massachusetts Institute of Technology, USA
Recently, exciting new physics and applications are emerging from metamaterials made of artificial “atoms” and “molecules”. These metamaterialshas

24inspired a series of key explorations to manipulate, store and control the flow of energy at unprecedented dimensions.Yet, these ground-breaking
achievements are only the tip of the iceberg, where the next-generation metamaterials, incorporating unique topological interactions between waves andmatter, are waiting to be discovered.In this talk, I will discuss our effort of fabrication and characterization of these optical metamaterials for broadband
light trapping, mixing and extraction. Such strong localizationand enhanced photoemission is observed by novel near field optical and electronprobes.These novel metamaterials,could be the foundation ofbroadband photo-absorbers, directional emitters, as well as compact and power-efficientdevices in highly parallel optical networks.I will also discuss our progress indigital optofluidic self-assembly processes for scalablemanufacturing ofthese heterogeneous metamaterials.

10:30-11:00

Coffee Break and Exhibition

11:00-11:30 1A4

Keynote Speaker 3: Gilbert C. Walker (Watson Auditorium)
Chair: Gobrecht Jens & Zheng Cui(1A4-KS-3) NOVEL DEVELOPMENTS B AS ED ON ATOMIC FORCE MICROS COPY ……………………………No.22
Gilbert C. Walker
Department of Chemistry, University of Toronto, Canada
Several developments of atomic force microscopy are reported. The first is a way to probe the mechanical responses of single molecules and the surfaces
to which they are attached. The second is a way to probe the mechanical properties of anisotropic nanomaterials such as individual boron nitride
nanotubes. The third is a way to probe the infrared vibrational spectra of materials with 20 nm spatial resolution. The physical principles and scientificfrontiers opened by these probes will be presented.

11:30-12:00 1A4

Keynote Speaker 4: Wan-Lin Guo (Watson Auditorium)
Chair: Gobrecht Jens & Zheng Cui(1A4-KS-4) ADVANCES AND CHALLENGES IN GRAPHEN E B AS ED DEVIC ES ……………………………………No.29
Wan-Lin Guo
Institute of Nanoscience, Key Laboratory of Intelligent Nano Materials and Devices of Ministry of Education and State Key
Laboratory of Mechanics and Control for Mechanical Structures, Nanjing University of Aeronautics and Astronautics, Nanjing,
210016, China
During the last three decades, we have been digging down from macro- to micro- and nano-scale for fabrication of both structures and electromechanicalsystems. Especially in the last decade, our ability to manipulate and use the single atomic hexagonal carbon layer, graphene, lead us to a new stage inmicro and nanotechnology. No like the never visible o-dimensional (0D) nanoparticles and one-dimensional (1D) nanowires and nanotubes, graphenebring us into a fantastic two-dimensional (2D) age of nanotechnology, which can be fabricated and applied at wafer scale, visible at single layer but
showing exceptional mechanical, electronic, magnetic and optical properties completely distinguished from its bulk form graphite. This kind of 2D
functional materials links the atomic properties with the engineering scale of our mankind, completing the nanomaterial dimensions and showing greater
potential for marketing technology. In this lecture, we will briefly review the recent advances in fabrication, characterization, transfer, and applicationsof single and few layered graphene for functional devices, including strain sensors, gas flow sensors, transistors, photonic manipulators, magnetic
devices, electromagnetic and optoelectronic devices, and in energy technology. Other important 2D materials beyond graphene will be briefly
introduced. Especially, challenges for manufacture of 2D materials and their devices will be analyzed based on our experience and comprehensive
understanding. New materials are always used for create new principle devices and bring us into new regime of technology. Some perspectives forgraphene like 2D functional materials will be finally discussed.

12:00-13:00

Conference Lunch (Grand Ball Room)

13:00-14:15

Session:1B1

Session:1C1

Session:1D1

Session:1E1

Room

F1

M2

M3

EIII

Topic

Micro/nano Fabrication &Cross-Starit
Nanomaterials 1

Metrol ogy 1

Chair

Xiaojing Zhang

Best Conference Paper
Ini vted Session 1

Wendong Zhang

Zewen Liu

Gwobin Lee&Co-Chair& Weizheng Yuan

& Qiao Lin& Fangang Tseng& Lina S arro

Paper ID

327, 285, 308, 326, 197

117,152,297,314,338

136,138,151,367

268,162,243,467,462

25

13:00-14:15 Session: 1B1
Chair&Co-Chair:

Micro/nano Fabrication & Metrology 1

Room F1

Xiaojing Zhang & Weizheng Yuan

(1B1-1) FAB RICATION OF THREE-DIMENS IONAL METALLIC MICROCOMPONENTS IN FUS ED S ILICA B Y A
FEMTOS ECOND LAS ER & MICROMOULDING (FLM) MET HOD ……………………………………………………No.327
Keyin Liu, Yu long Zhao, Qing Yang, Feng Chen, Shengguan He, Xiaole Fan, Lei li, Chao Shan and Hao Bian
State Key Laboratory for Manufacturing System Engineering & Key Laboratory of Photonics Technology for Information of Shaanxi
Province, Xi’an Jiaotong University, Xi’an, 710049, China
Three-dimensional (3D) metallic microdevices are essential for the micro-electromechanical systems (M EMS) and microfluidic applications. In thispaper, a femtosecond laser based micromoulding (FLM ) method is employed to fabricate 3D metallic conductive microcomponents in fused silica. 3D
microcavities/ microchannels in fused silica, which are served as the molds of metallic microcomponents, are fabricated by taking full advantage of the
improved femtosecond laser irradiation followed by chemical etching (FLICE) technology. Solid metallic conductive microcomponents are thenachieved in the 3D micromolds by injecting liquid metal with a microfluidic-compatible micromoulding device and solidifying the liquid metal. The
FLM technology consists of a facile and maskless fabricating procedure, and enables convenient application of the inherently aligned 3D metallic
microcomponents in microfluidic systems.

(1B1-2) MICRO-RAMAN SPECTROSCOPY ANALYS IS OF RES IDUAL STRESS IN POLYS ILICON MEMSRESONATORS …………………………………………………………………………………………………………………No.285
Chen xu Zhao, Mengwei Li, M ing Yin, and Zewen Liu
Institute of Microelectronics, Tsinghua University, Beijing, China
This paper presents the recent results of utilization of micro-Raman spectroscopy to measure and characterize residual stress in polysilicon
doubly-clamped M EMS resonators with small lateral size. Due to imprecise prediction of the magnitude of intrinsic residual stress, detrimental effect of
the residual stress severely shifts the resonant frequency of M EMS resonator from the analytical pre-designed value. The stress is not only determined by
the fabrication process but also related to the structural dimensions of resonators. In this work, micro-Raman spectroscopy was used to measure theresidual stress of resonators with widths down to 2μm. The results show that the optimized resonator with length shorter than 50μm and width between
3.2μm and 4.1μm exhibits minimum residual stress.

(1B1-3) MICRO/NANO STRUCTURE WRITTEN VIA S HEATH GAS ASSISTED EHD J ET …………………………No.308
Guangqi He, Gaofeng Zheng*, Jianyi Zheng, Yihong Lin, Jin Wei, Haiyan Liu, Bin Wang, Daoheng Sun
Department of Mechanical and Electrical Engineering, Xiamen University, Xiamen, China
Laminar sheath gas is introduced into the Electrohydrodynamic Direct-Write (EDW) to promote the stability of charged jet and deposition precision of
printed micro/nano structure. A novel EDW spinneret with sheath gas is designed to fabricate fine 1D micro/nano structure under lower applied voltage.
The laminar sheath gas restricts the whipping motion of charged jet as well as decreases the required voltage. With the help of stretch force stems fromsheath gas, the initiation voltage and sustaining voltage of EDW can be decreased obviously; the average diameter of micro/nano structure can be
decreased from 21.58μm to 505.58nm. Different patterns can be also obtained by adjusting the moving speed of the collector in a sheath gas cases.
Therefore, it can be concluded that provides a unique way for the precision deposition and integration of EDW micro/nano structure with in the
micro/nanosystems.

(1B1-4) FAB RICATION OF S ILICA OPAL ARRAY WITH HIGH MECHANICAL STRENGTH …………………No.326
Hui Li, Wei Wang, Huaiqiang Yu, Ren xin Wang, Zewen Wei, Zhihong Li
National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectronics, Peking University,
Beijing, China
This paper focuses on fabrication of opal structures by self-assembling silica spheres, which can be used as an array of high throughput and low cost
reactors or micro-filters. The reactors can carry out hundreds different reactions in parallel; while there is about 50 nano-liter reagent consumed in eachreactor. It not only provides large surface area for reaction, but also solves the issue of high throughput experiments. The mechanical strength of the opal
has to be high enough to withstand fluid flushing during sample loading and cleaning. In this paper, the optimized process is developed to fabricate therobust and crack-less opal membrane.

(1B1-5) SLIDING MODE CONTROL WITH ADAPTIVE FEEDFORWARD COMPENSATOR FOR ULTRA-PRECIS ION
ACTIVE VIB RATION ISOLATION ………………………………………………………………………………………No.197
Huayan Pu 1, Wenchuan Jia1, Xuedong Chen 2
1
School of Mechatronics Engineering and Automation, Shanghai University, China
2
the State key Laboratory of Digital Manufacturing Equipment & Technology, Huazhong University of Science and Technology
Ultra-precision active vibration isolation system protects ultra-precision equipment from the transmission of external vibration, and suppresses vibration
incurred by internal structures. In order to obtain the ideal skyhook effect, the sliding mode controller with adaptive feedforward compensator is
proposed in this paper. With the controller, the vibration system can obtain the desire performance even when the system is under model uncertainties
and significant direct disturbance. A series of simulations are carried out to verify the effectiveness of the controller.

13:00-14:15 Session: 1C1
Chair&Co-Chair:

Nanomaterials 1
Wendong Zhang & Qiao Lin

26

Room M2

(1C1-1) Ag 2S QUANTUM DOT: A BRIGHT AND B IOCOMPATIB LE FLUORES CENT NANOPROB E IN THE S ECOND
NEAR-INFRARED WINDOW …………………………………………………………………………………………………No.117
Yejun Zhang 1, Yan Zhang 1, Guosong Hong 2, Hongjie Dai2, Qiangbin Wang 1
1
Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou, China.
2
Stanford University, Stanford, United States.

Fluorescent imaging in the second near-infrared window (NIR-II, 1.0~1.4 μm) is appealing due to minimal autofluorescence and negligible tissue
scattering in this region, affording maximal penetration depth for deep tissue imaging with high feature fidelity. Simulations and modeling studies
suggested that fluorophores with emission in the 1000-1320 nm NIR-II region could significantly improve signal-to-noise ratio compared to thoseemitting at 650-950 nm (NIR-I). Recent efforts have been devoted to identifying NIR-II emitting agents for in vivo imaging applications. Quantum dots
(QDs) such as PbSe, PbS, and CdHgTe with NIR emission have been successfully developed. However, the highly toxic nature of Pb, Cd and Hg is ofconcern for in vivo applications. Therefore, highly biocompatible NIR-II fluorescent probes that do not contain Cd, Pd or Hg will facilitate biologicalimaging in this beneficial spectral region. Herein, we first reported a new type of NIR QDs, Ag2S QDs, with emission in the NIR-II region. For the firsttime, highly selective in vitro targeting and imaging of different cell lines were achieved using biocompatible NIR-II Ag2S QDs with different targeting
ligand. Furthermore, in vivo imaging of early-stage tumor in mice with Ag2S QDs was also achieved. Video-rate dynamic contrast-enhanced imaging
revealed deep inner organs and tumor in mice. Due to ultralow background and reduced photon scattering in NIR-II, early-stage detection of ultrasmall
tumor (~0.25 mm3) and hindlimb vessel imaging with Ag2S QDs at high spatial resolution and deep tissue penetration were demonstrated. The
6PEG-Ag2S QDs afforded an unusually high tumor uptake of QDs of >10 % injected dose/gram, owing to a long circulation half-life of ~4 h. Clearanceof the injected 6PEG-Ag2S QDs occurred mainly through the biliary pathway in mice. The Cd- and Pd-free nature, NIR-II emission, branched PEG
coating and favorable pharmacokinetics of 6PEG-Ag2S QDs make them a promising in vivo imaging agent.

(1C1-2) NANOTEXTUR ED CHITOSAN S URFACES FOR S TUDYING CELL B EHAVIORS ………………………No.152
Chung-Yao Yang, Chun-Yen Sung, J. Andrew Yeh
Institute of Nanoengineering and Microsystems, National Tsing Hua University, Taiwan
This paper describes an easy method to fabricate nanoscale features on chitosan membranes from a silicon mold through using a combination of solution
casting and etching process. Three different molecular weight chitosan powders were used to evaluate the topography of nanoscale features after molding
process. The Young's modulus of three different molecular weight (120, 185 and 250 kDa) are almost the same in air with a value about 6 GPa and in
medium with a value about 5 MPa. The size of the nanotexture is 250 nm in width and 200 nm in depth. Human breast cancer cells M CF-7 and HIG-82
fibroblasts were cultured on patterned nanotextured chitosan surfaces and both cells can be patterned on specific regions. The results exhibited the cells
preferred to adhere on flat chitosan surfaces than on nanotextured chitosan surfaces. This nanotextured chitosan surfaces could be used for controllingcell development in bio-relevant applications, such biomedical devices, biology and tissue engineering.

(1C1-3) GROWTH OF ARRAYED ZnO NANOWIRES US ING A SOLUTION METHOD ……………………………No.297
Shouhe Zhang 1, 2, Yongji Gao 1, 2, Mengdi Han 1, Haixia Zhang 1
1
National Key Laboratory on Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, China
2
Peking University Shenzhen Graduate School, Shenzhen, China
In this paper, we report a simple solution method to synthesize well-aligned ZnO nanowires (NWs) arrays on silicon substrate with ZnO seed layer. We
can control the morphology of ZnO NWs arrays by adjusting growth parameters, such as the thickness of the seed layer, the concentration of thesolution, the growth temperature, the growth time and the pretreatment, etc. The size of ZnO NWs will change regularly according to the theseparameters, too, for example, results show that the diameter and alignment will upgrade as the thickness of the seed layers increased, and the length anddiameter will increase as the concentration, temperature and growth time increased. What’s more, the ultrasonic pretreatment of the solution mixture andthe pre-cleaning of the substrate in the reaction solution will enhance the uniformity of ZnO NWs significantly . This synthesis technique can be carriedout at low temperature, low cost and large scale on any substrates.

(1C1-4) FAB RICATION OF NANOPORES US ING ELECTRON B EAM ………………………………………………No.314
Tao Xu, Xiao Xie, Litao Sun
SEU-FEI Nano-Pico Center, Key Laboratory of MEMS of Ministry of Education, Southeast University, China
Sub-5 nm nanopores are widely used in singlemolecule detections for biological and chemical applications. However, the traditional fabrication methods
are difficult to reduce pore size to sub-5 nm. Focused electron beam irradiation inside a transmission electron microscope (TEM) is verified
experimentally to be an effectively straightforward way to fabricate such small pores. The fabrication process can be explained by a simple physicalcollision model. We also fabricate graphene nanopores under various temperatures. The results verify that drilling at high temperature and direct thermal
heating treatment can be beneficial to fabricate carbon nanostructure with high crystallization, which will promote the study of biological measurement.
High temperature could also modulate the duration of fabrication, which can enhance the size control during nanopore fabrication.

(1C1-5) MECHANICAL PROPERTIES OF PIEZOEL ECTRIC PVDF/ MWCNT FIB ERS PREPARED B Y FLAT/ HOLLOWCYLINDRICAL NEAR-FIELD EL ECTROSPINNING PROCESS …………………………………………………………No.338
Z.H. Liu 1, C.T. Pan 1, L.W. Lin 2, H.W. Li1 , C.A. Ke1, J.C. Huang 3, P.S. Wang 1,
1
Department of Mechanical and Electro-Mechanical Engineering, National Sun Yat-Sen University, and Center for Nanoscience &Nanotechnology, National Science Council Core Facilities Laboratory for Nano-Science and Nano-Technology inKaohsiung-Pingtung area, Kaohsiung 804, Taiwan
2
Department of Mechanical Engineering and Berkeley Sensor and Actuator Center, University of California, Berkeley, USA27

3

Department of Materials and Optoelectronic Science, National Sun Yat-Sen University, Kaohsiung Taiwan

The existing study focused more on onedimensional nanostructures such as nanotubes and nanofibers for various potential applications, but less on
evaluation of their mechanical properties. Therefore, this study mainly concentrates on near-field electrospinning (NFES) and hollow cylindricalnear-field electrospining (HCNFES) process to fabricate permanent piezoelectricity of polyvinylidene fluoride (PVDF)/multi-walled carbon nanotube(M WCNT) nanofibers. Comparing NFES and HCNFES, it can be seen that HCNFES was fabricated under high electrical field with in-situ strong
mechanical stretching for possible alignment of dipoles along the longitudinal direction of PVDF nanofiber. Therefore, PVDF nanofibers fabricatedusing HCNFES can be of smaller diameters and higher contents of β-phase with excellent piezoelectricity. In addition, the crystallization and mechanicalbehaviors of PVDF nanofibers were influenced by the PVDF solution concentration and addition of M WCNT. The tensile test shows that the yieldstrength increases with increasing 0.03% MWCNT and 16% PVDF solution.

13:00-14:15 Session: 1D1
Chair&Co-Chair:

Cross-Starit Inivted Session 1

Room M3

Zewen Liu & Fangang Tseng(1D1-1) DUAL FACED S ERS NANOPARTICLES EQUIPPED WITH TRI-FUNCTIONS FOR TARGET DRUG
DELIVERING INTO SINGLE CELL …………………………………………………………………………………………No.136
Hsin-Yi Hsieh 1 and Fan-Gang Tseng 1,2,3
1
Institute of NanoEngineering and MicroSystems, 2 Department of Engineering and System Science, National Tsing Hua University,
Hsinchu 300, Taiwan
3
Research Center for Applied Sciences, Academia Sinica, Taipei 115, Taiwan
We report an approach to fabricate dual-faced polystyrene beads (DFPSBs) with tri-functions of tumor cells recognition, drug delivery, and real-time
Raman sensing. Onestep oxygen-plasma treatment process was used to etch commercially available fluorescent polystyrene beads into a corrugatedupper hemisphere and simultaneously change the entire surface with carboxylic groups. After depositing gold onto the corrugated hemisphere for surface
enhanced Raman scattering (SERS) while leaving the other smooth and clean hemisphere for fluorescence detection, the DFPSBs are formed withdual-surfaces of plasmonic gold semishells on the top and fluorescent carboxylated polystyrene at the bottom. Sulfo-NHSSS-biotin disulfide linkers andanti-CD44 antibodies can be modified and added onto the top gold surfaces and the bottom carboxyl groups through Au-S and peptide bonds,
respectively. Then, the surface-modified AuFNM suspension can be employed to target overexpressive glycoproteins (CD44) on the surfaces of cancer
cells and release their loads via the cleavage of disulfide bonds in the cytoplasm environment. These anti-CD44-modified DFPSBs exhibit a 12-foldcancer targeting ability on HeLa cells when compared to a normal chondrocyte cell.

(1D1-2) DEPTH DET ECTION FOR FAST MOVING OBJ ECTS IN A MICROCHANNEL UTILIZING CHROMATIC
AB ERRATION UNDER A DIASCOPIC MICROSCOPE ……………………………………………………………………No.138
Shin-Yu Su, Che-Hsin Lin
Department of Mechanical and Electro-mechanical Engineering,National Sun Yat-sen University, Taiwan
This research describes a novel technique for detecting the z-position of fast moving objects utilizing chromatic aberration, with this simple and novel
approach, the depth of moving object can be measured without delicate optical system. Instead of complicated calculation, the intensity ratio of 2 defined
wavelengths is used to indicate the relationship between depth and the change in wavelength. Results show that the developed system gives a large
detection range of 30 μm with a high linearity. The device is capable to resolve variation in depth as low as sample size within 4-5μm when using 20X
objective. This developed system is able to resolve the moving particles with the throughput of about 126 particles per second, which is much faster than
the speed of a confocal microscope system. The developed depth detection scheme provides a simple and high performance way to dynamically identify
the z-position of micro moving parts in MEM S applications.

(1D1-3) MICRO THERMAL FLOW S ENSORS/SYSTEMS ON FLEXIB LE PCB AND EXTENS IVE APPLICATIONS……………………………………………………………………………………………………………………………………No.151
Rong Zhu, Ru iYi Que, Zhe Cao
State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instruments andMechanology, Tsinghua University, China
We demonstrate our researches on developing micro thermal flow sensors by depositing nano metallic films on flexible substrates for detecting surface
flow. The fabrication of the sensors is incorporating standard printed circuit technique with micromachining deposit/sputter, which takes advantages oflow cost, easy fabrication, easy packaging and integrating sensors with processing circuits. The applications using the sensors to detect airflow around air
vehicles, underwater wall shear stress, and to measure respiratory flow for monitoring and diagnosing respiratory diseases are also presented.

(1D1-4) NOVEL INERTIAL SWITCHES FOR IMPACT DET ECTION …………………………………………………No.367
Yao-Joe Yang
National Taiwan University, Taipei, Taiwan
This work presents the development of two types of inertial switches for impact detection. The first type of the devices, as shown in Figure 1, uses
stimuli-sensitive hydrogel integrated with a passive inductor/capacitor (L-C) resonator, and the detected signal can be interrogated wirelessly using thephase-dip technique. This device consists of a glass substrate with a capacitor plate and an inductor coil, and a PDM S micro-fluidic chip containing ahydrogel composite and water droplet. When the acceleration exceeds the designed threshold-level, the water passes through the channel to the hydrogel
cavity. The hydrogel swells and changes the capacitance of the integrated L-C resonator, which in turn changes the resonant frequency that can beremotely detected. The response time of the device can be considerably reduced by introducing multi-wall carbon nanotubes (M WCNTs) into thehydrogel composites. All PDM S structures were fabricated using soft lithography. The L-C resonator was fabricated using a lift-off process to pattern28

metal layers on a glass substrate. The dimensions of the device are 15 mm × 10 mm × 1.5 mm. The characterization of the proposed device was also
demonstrated. The threshold g-values, which differ for various applications, were strongly affected by the channel widths. The phase-dip measurementshows that the resonant frequencies shift from 164 MHz to approximately 148 MHz when the device is activated by acceleration.

13:00-14:15 Session: 1E1
Chair&Co-Chair:

Best Conference Paper

Room EIII

Gwobin Lee & Lina Sarro(1 E1-1) SILICON NANOWIRE RESONATORS FOR AEROSOL NANOPARTICLE MASS S ENSING ………………No.268
Hutomo Su ryo Wasisto 1, Stephan Merzsch 1, Andrej Stranz1, Andreas Waag 1,Erik Uhde2, Tunga Salthammer2 , Erwin Peiner1
1Institute of Semiconductor Technology (IHT), TU Braunschweig, Germany
2
Material Analysis and Indoor Chemistry Department (MAIC), Fraunhofer WKI, Germany
In this work, silicon nanowire-based resonators were fabricated and employed to sense aerosol nanoparticles (NPs) by measuring resonant frequency
shifts induced by the mass of stuck NPs. The fabrication of silicon nanowire (SiNW) arrays was performed utilizing inductively coupled plasma (ICP)
cryogenic dry etching and multiple thermal oxidations. The SiNWs were coated with gold for contacting to the homebuilt electrostatic NP sampler tocollect the flowing NPs. A piezoelectric shear actuator mounted in the frequency measurement system was used to excite the SiNW sensors into
resonance. Tested in a TiO2 aerosol sampling with a total concentration of ~8500 particle/cm3, the sensor displayed its feasibility as a nanobalance todetect aerosol NPs in the femtogram scale with a mass sensitivity of 7.1 Hz/fg and a mass resolution of 31.6 fg. To extend the operating life of thesensor, an ultrasonic removal method was used to detach the adhered NPs.

(1 E1-2) SPECIAL PROPERTIES OF NEW TYPE CARB ON-COPPER CORE-S HELL NANOPARTICLES COMPOS ITE
MATERIAL FAB RICATED US ING B IOMASS AS TEMPLATE …………………………………………………………No.162
Kun Lian *1 , Yadong Qi 2 , Qinglin Wu 3 , Xiaopeng Wang 4, Weifeng Li 5*
Suzhou School of Nano-Science and Nano-Engineering, Xi’an Jiaotong University, Suzhou Industrial Park. China. 215123
1
Center for Advanced Microstructures and Devices, Louisiana State University, Baton Rouge, LA70806, USA
2
Urban Forest Department, Southern University AgCenter, Baton Rouge, LA70813,USA
3
School of Natural Renewable Resource, Louisiana State University AgCenter, Baton Rouge, LA70803, USA
4
School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an, China
5
Xi’an Jiaotong University School of Medicine, Xi’an, China
A new type of carbon-copper core-shell nanoparticles (CCCSNs) have been fabricated using biomass as template. CCCSNs, as made, arehomogeneously embedded in carbon black as a composite material. The composite material can be further processed in different dimensions (fromhundreds nanometers to meters) based on application needs. The special carbon shells transformed from biomass can protect the copper core fromoxidation in ambient environment for years, at the same time; let Cu show the typical antibacterial, antifungal, antifouling properties through it. The
CCCSNs made from this innovative technology eliminates the detrimental impacts of conventional engineered nanoparticles usually have and provide
the superior properties, including the low cost for fabrication, that conventional copper nanoparticles don’t have.

(1 E1-3) SPONTANEOUS S HRINKING S ILICA NANOMEMB RANE FOR SOLID PHAS E DNA EXTRACTION……………………………………………………………………………………………………………………………………No.243
Yi Zhang 1, Ye Zhang 1, Brian Keeley 2, Alejandro Stark2, Tza-Huei Wang 1, 2
1
Department of Biomedical Engineering, Johns Hopkins University, Baltimore, Maryland, USA
2
Department of Mechanical Engineering, Johns Hopkins University, Baltimore, Maryland, USA
In this report, we describe a novel approach to fabricating silica nanomembrane based on the spontaneous shrinking of pre-stretched, heat-shrinkablepolyolefin (PO) film coated with silica. The surface resulted from the surface wrinkling exhibits unique overlaying hierarchical structures ranging fromnano to micro scale, which is mainly determined by the thicknesses of silica deposition. We have applied the nanomembrane to DNA purification, andhave evaluated its efficiency by comparing with commercial magnetic particles. Results show that DNA extracted with nanomembrane has higher
recovery yield than those extracted with particles. Thicker silica layer leads to larger specific areas thus larger DNA absorption capacity and higher
recovery yield. Furthermore, DNA isolated using the nanomembrane display higher purity and better integrity.

(1 E1-4) ICE FIS HING MICRO CHANNELS WITH S UB -MICRON PORES ……………………………………………No.467
Justin Young-Hyun Kim1, Yang Liu 2, Nicholas Scian marello 2, Penvipha (Yok) Satsanarukkit2, Yu-Chong Tai2
1
DMC R&D center, Samsung Elec., Suwon, Korea
2
Electrical Engineering, California Institute of Technology, Pasadena, USA
We report here a micro fluidic device with a controlled opening, which is used for accessing the fluid inside the micro channel from outside. The controlof the reduced diameter of the opening pore is achieved by depositing a controlled Parylene layer on a starting lager opening hole. By changing theParylene type and thickness, we can control the pore size and surface hydrophobicity. Due to the Laplace-Young’s pressure induced by the surface
tension of the liquid in the vicinity of the pore, the internal fluid can be pressurized without leaking through the pore.

(1 E1-5) STRONG S ERS FROM GOLD NANOSTRUCTURE SANDWICHED ON S INGLE LAYER GRAPHENE FORHIGH S ENS ITIVE B IOMOLECUL E DET ECTION ………………………………………………………………………No.462

29

Hung-Yao Chu, Judy M. Obliosca, Pen-Cheng Wang, and Fan-Gang Tseng
Engineering and System Science Department, National Tsing Hua University, Hsinchu, Taiwan
In this paper, we introduce a simple and highthroughput technique for developing a strong surface-enhanced-Raman-Scattering (SERS) sensor by
sandwiching dual gold nanoparticle (GNPs) on single layer graphene (SLG) for biomolecule detection. Through this way, the overall nanostructure size
can be much closer to 10 nm which is more suitable for individual biomolecule sensing.

14:15-15:30

Session:1B2

Session:1C2

Session:1D2

Session:1E2

Room

F1

M2

M3

EIII

Topic

Micro/nano Fabrication &Cross-Starit
Nanomaterials 2

Metrol ogy 2

Best Student Paper
Ini vted Session 2

Chair

Xiong ying Ye&Co-Chair& Slaughter Gymama& Chengkuo Lee& Baoqin Chen

& Shanhong Xi aPaper ID

375, 341, 365, 336,504

356,439,478,491,497,544

273,307,298,392

281,283,351,453,165

14:15-15:30 Session: 1B2
Chair&Co-Chair:Wengang Wu

Chao-Min Cheng

Micro/nano Fabrication & Metrology 2

Gwobin Lee

Room F1

Xiongying Ye & Slaughter Gymama(1B2-1) FACILE AND VERSATILE REPLICATION OF HIGH-PERFORMANCE S UPERLYOPHOB IC S URFACES ON
CURABLE S UBS TRATES US ING ELASTOMER MOLDS …………………………………………………………………No.375
Lifang Yuan 1, Zhaoyun Guan 1, Weiji Zhang 1, Yu ji Su zuki2, Rong Xiang 1, Xuchun Gu i1, Yuan Zhu 1, Zikang Tang 1,3,4, Liang Zhang 5
and Tianzhun Wu 1
1
School of Physics and Engineering, Sun Yat-sen University, Guangzhou, China
2
Department of Mechanical Engineering, The University of Tokyo, Tokyo, Japan
3
State Key Lab of Optoelectronic Materials & Technologies, Sun Yat-sen University, Guangzhou, China
4
Department of Physics, Hong Kong University of Science and Technology, Hong Kong, China
5
Key Lab for New Drugs Research of Traditional Chinese Medicines Shenzhen, Research Institute of Tsinghua University in
Shenzhen, Shenzhen, China
We have developed a facile, versatile and low-cost fabrication method for high-performance superlyophobic surfaces (SLS, simultaneously
superhydrophobic and superoeleophobic) on curable materials, which is promising to unblock the two bottlenecks of SLS (relying on very few materials
and requiring demanding fabrication). By using poly(dimethylsiloxane) (PDM S) as the elastomer mold, T-shape microstructures of Si-based SLS werereadily transferred to poly(methyl methacrylate) (PMMA) with high precision, high fidelity and comparable non-wetting performances. The repeatableand durable use of Si and PDM S allowed mass production of SLS on various curable materials without significant deterioration, and dramatically diluted
the fabrication cost. We believe this method may initialize the high-throughput, high-performance and low-cost SLS fabrication on various substrates.

(1B2-2) A NOVEL MET HOD TO FABRICATE S ILICON NANOPORE ARRAYS ………………………………………No.341
T. Deng, C. Zhao, J. Chen, Z. Liu
Institute of Microelectronics, Tsinghua University, Beijing, China
This paper presents a novel method for fabrication of silicon nanopore arrays. The proposed method comprises of an inductive coupled plasma (ICP)
deep etching and a two-step anisotropic wet etching. A nanopore array with an average feature size of 55 nm and several individual rectangular
nanopores with feature sizes as small as 18 nm were successfully obtained using this method. These results indicate the potential of this method for thelarge-scale production of nanopores arrays with desired sizes and shapes.

(1B2-3) S USPENDED MAGNETIC POLYMER STRUCTURES FAB RICATED WITH EXPOS URE DOS E CONTROL……………………………………………………………………………………………………………………………………No.365
Jui-Chang Kuo, Chong-Shuo Li, and Yao-Joe Yang
Department of Mechanical Engineering, National Taiwan University, Taiwan
This work presents a fabrication process for realizing suspended magnetic polymer structures with SU-8 photoresist dispersed with Fe3O4 nano-particle.
By controlling the exposure doses of ultraviolet (UV) light, the floating structure is patterned at the first exposure, and then the anchor structure ispatterned at the second exposure. Suspended magnetic polymer structures such as doubly-clamped beams and circular diaphragms can be fabricatedsuccessfully after releasing from one development process. In addition, the functionalities and characterizations of the realized magnetic doubly-clamped
beam were demonstrated and discussed. The resonant frequencies of the structure were measured under sinusoidal magnetic fields with an amplitude of
10.37 mT. The resonant frequencies of the structures with 5 mm and 6 mm in length are 5.21 kHz and 4.18 kHz, respectively.

(1B2-4) A DIRECT-WRITE LARGE PVDF NANOFIB ER ARRAYS B Y MEANS OF HOLLOW CYLINDRICAL
NEAR-FIELD EL ECTROSPINING PROCESS ………………………………………………………………………………No.336

30

1

1

2

1

1

Z.H. Liu , C.T. Pan , L.W. Lin , Y.L. Lin , Z.Y. Ou
1Department of Mechanical and Electro-Mechanical Engineering, National Sun Yat-Sen University, and enter for Nanoscience &Nanotechnology, National Science Council Core Facilities Laboratory for Nano-Science and Nano-Technology inKaohsiung-Pingtung area, Kaohsiung 804, Taiwan
2
Department of Mechanical Engineering and Berkeley Sensor and Actuator Center, University of California, Berkeley, USA
In this study, HCNFES (hollow cylindrical near-field electrospining) process was explored to fabricate permanent piezoelectricity of PVDF
(polyvinylidene fluoride) piezoelectric nanofibers. Under high in-situ electric poling (5×106-1.6×107 V/m) and strong mechanical stretching effect(rotating velocity of the tube collector: 900-1900 r.p.m, tangential speed 942-1989.3 mm/s) during HCNFES process (Fig. 1), large PVDF nanofiber
array (see Fig. 2) with high piezoelectric β-phase crystallisation was demonstrated. PVDF nanofibers were spun on a PET (polyethylene terephthalate)
substrate; silver paste was applied at both ends of fibers to fix their two ends tightly on a Cu (copper) foil electrode pair. The entire structure was
packaged inside a thin flexible polymer to maintain its mechanical stability (Fig. 6). Repeatedly stretching and releasing the nanoharvester with a strainof 0.05 % at 7 Hz vibration, a maximum peak voltage and current of -76 mV (Fig. 7(a)) and -10 nA (Fig. 7(b)) can be obtained, respectively.

(1B2-5) FAB RICATION OF ARRAYED ASPHERIC MICROLENS B Y EXCIMER LAS ER AND APPLIED TO
MAS K-LESS B EAM PEN LITHOGRAPHY …………………………………………………………………………………No.504
Chi-Cheng Chiu, Ch ih-Hao Chang, Cing-Yun Lu and Yung-Chun Lee
National Cheng Kung University, Taiwan
This paper reports the fabrication on an array of microlenses which have an optimally designed aspheric lens profile for the application of mask-lessbeam pen lithography. The microlens array is fabricated using an excimer laser micromachining system along with a contour mask and a bi-axial
scanning method. The microlenses are fabricated using a laboratory-built KrF 248 nm excimer laser micromachining system. The overall machined areaof the microlens array is 13×13 mm2 which consists of an array of 106×106 microlenses. To demonstrate the capability of this mask-less beam pen
lithography system, A metallic pattern with an array of characters of “NCKU” that are first "written" by the UV bean pens on a thin AZ1500 PR layer.
The minimal line-width of these characters is around 1.23 μm.

14:15-15:30 Session: 1C2
Chair&Co-Chair:

Nanomaterials 2

Room M2

Wengang Wu & Chengkuo Lee(1C2-1) THE EFFECT OF OUT-OF-PLANE S TRAIN ON THE ELECTRONIC PROPERTIES OF ZIGZAG GRAPHENE
NANORIBBONS …………………………………………………………………………………………………………………No.356
Xiaohui Hu, Xiao Xie, Litao Sun
SEU-FEI Nano-Pico Center, Key Laboratory of MEMS of Ministry of Education, Southeast University, 210096 Nanjing, China
We have studied the influence of out-of-plane strain on the electronic properties of zigzag graphene nanoribbons (ZGNRs) using first principles methods.
We find that the electronic properties of ZGNRs are highly sensitive to the strains. As the strain increases, the band gap first remains almost invariant
and then decreases monotonically, which could be used to design high precision strain sensors. ZGNRs based sensors would possess higher sensitivity
and quicker response compared to the conventional sensors.

(1C2-2) CONTROLLAB LE PREPARATION AND CHARACTERIZATION OF GRAPHEN E-B AS ED COB ALT OXIDENANOCOMPOS ITES …………………………………………………………………………………………………………No.439
Jing Ji, Kuibo Yin, Litao Sun
SEU-FEI Nano-Pico Center, Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing, China
Here we introduce a facile hydrothermal synthesis for the controllable growth of cobalt oxide (Co3O4) nanoparticles onto graphene nanostructures. The
Co3O4 particles were monodispersive with a grain size less than 10 nm and homogeneously anchored on graphene sheets. The effects of oxidants,
reaction temperatures, and reaction times on the microstructures of final products were investigated, respectively. The obtained material wascharacterized by transmission electron microscopy (TEM ) and high-resolution TEM (HRTEM ).

(1C2-3) SPRAY DEPOS ITED CuInS 2/TiO2 THIN FILM SOLAR CELLS …………………………………………………No.478
J.Kaliang, S.Chaisitsak
Department of Electronics Engineering, Engineering,King Mongkut's Institute of Technology Ladkrabang, Ladkrabang, Thailand
Copper indium sulfide (CIS) solar cells with Ag/CIS/TiO2/FTO/glass structure were fabricated by nonvacuum methods. The nanoporous TiO2 andnanocrystalline CIS films were prepared by screen-printing and spray pyrolysis techniques, respectively. The obtained films were examined using
field-emission scanning electron microscopy and X-ray diffraction. The solar cell properties were characterized under AM 1.5. The porous nature of
TiO2 layer was found to cause the formation of nanocrystalline CIS with a very small grain size within the TiO 2 matrix. The photocurrent could not be
observed in any devices without a TiO2 layer (i.e. CIS/FTO), while it was detected for the devices consisting of TiO2 layer (i.e.CIS/ TiO2/FTO). The
thickness of TiO2 layer was optimized for maximum efficiency. The highest efficiency obtained solar cells was 2.29 × 10-5 % (Voc: 0.147 V, Jsc:
6.52×10-7A/cm2, FF: 0.24) with a 3-μm-thick TiO2.

(1C2-4) INDENTATION-INDUCED TWO-WAY SHAPE-MEMORY EFFECT IN Ni Ti ………………………………No.491
Nico las J. Peter1 , Mareike Frensemeier1, Enwei Qin 1, Carl P. Frick2 , Eduard Arzt1,3, Andreas S. Schneider1,31

1

INM-Leibniz Institute for New Materials, Campus D2 2, 66123 Saarbrücken, Germany
University of Wyoming, Mechanical Engineering Department, 1000 East University Avenue, Laramie, WY 82071, USA
Saarland University, 66123 Saarbrücken, Germany

2
3

The indentation-induced shape-memory behavior in both an aged and a solutionized austenitic nickel-titanium (NiTi) alloy was investigated by Vickers
indentation. The depth recovery ratio of the indents as well as the formation of protrusions on the surface after planarization was analyzed after the
sample was heated above and cooled below the phase transformation temperature using a white light interferometer. For comparison a solutionized, fully
austenitic sample was subjected to the same indentation parameters and temperature changes. The results show that indentation induces a one-way andtwo-way shape-memory effect in the aged material containing small fractions of martensite and precipitates. In contrast, the solutionized fully austenitic
sample shows less pronounced one-way compared to the aged material and no two-way shape recovery. This phenomenon is discussed in terms ofmartensite stabilization by precipitates and dislocations.

(1C2-5) ORGANIC-INORGANIC LIPID NANOFIB ERS ENAB LING ANTIB ODY IMMOB ILIZATION AND CELLCAPTURE ………………………………………………………………………………………………………………………No.497
X. Wu 1,2, Z. Zha1, L. Jiang 1, Z. Dai3
1
Department of Aerospace and Mechanical Engineering, University of Arizona, Tucson, USA
2
Biomedical Engineering Program and Bio5 Institute, University of Arizona, Tucson, USA
3
Department of Biomedical Engineering, Peking University, Beijing, China
A biomimetic strategy is employed to functionalize organic-inorganic cholesteryl-succinyl silane (CSS) nanofibers with membrane-bound antibodies(Abs). Fluorescent microscopy and a cell capture assay confirm the stable and functional immobilization of Abs on the electrospun CSS nanofibers. An
insert-and-tighten mechanism is proposed for the observed hydration-induced reduction in lipid nanofiber diameter and the immobilization of Abs.
Subsequently, the anti-CD20 functionalized CSS nanofibers display greater ability to capture Granta-22 cells than their film counterparts, suggesting that
nanotopography plays an important role in antibody immobilization and cell capture. The ability to stably and functionally immobilize Abs on the CSS
nanofibers presents a promising method to functionalize lipid-based nanomaterials.

(1C2-6) MOLECULAR DYNAMICS S IMULATION OF NANOINDENTATION FOR S INGLE-LAYER RECTANGULAR
GRAPHEN E FILM ………………………………………………………………………………………………………………No.544
Weidong Wang 1, Yongjie Zhan 2, M inglin Li3
1
School of Electrical and Mechanical Engineering, Xidian University, China
2
Physics Department, Northwest University, China
3
School of Mechanical Engineering and Automation, Fuzhou University, China
Base on Tersoff and Lernnard-Jones potentials, molecular dynamics simulation of nanoindentation experiment on single layer rectangular graphene film
is carried out. A typical force-displacement curve is obtained and the effects of various factors including indenter radius, velocities as well as boundary
conditions on the simulation results are discussed. The Young’s modulus and the strength of the graphene are measured as 1 terepascals and 90
gigapascals, respectively.

14:15-15:30 Session: 1D2
Chair&Co-Chair:

Cross-Starit Inivted Session 2

Room M3

Chao-Min Cheng & Baoqin Chen

(1D2-1) ADVANCES OF CMOS-MEMS TECHNOLOGY FOR RES ONATOR APPLICATIONS ……………………No.273
Sheng-Shian Li
Institute of NanoEngineering and MicroSystems, National Tsing Hua University, Hsinchu, Taiwan
This paper reports on recent progress on high-Q integrated micromechanical resonators using “CMOS-MEM S technology” to enable monolithic
integration of MEM S and CMOS. Specifically, we take advantage of IC and semiconductor strength in Taiwan to develop several CMOS-M EM S
resonator platforms targeted for inherent integration of M EMS and circuitry towards single-chip implementation for timing reference and oscillator
applications. In addition, performance enhancement in terms of motional impedance, power handling, linearity, thermal stability, frequency tunability,
quality factor, and feedthrough level have been addressed.

(1D2-2) DISSOLUB LDISSOLUB LE CROSS-LINKED POLYMER MATERIAL FOR UV-CURING NANOIMPRINT
LITHOGRAPHY ………………………………………………………………………………………………………………No.307
Xin Hu, Haixiong Ge
National Laboratory of Solid State Microstructures, Nanjing University, Nanjing, 210093, China
Insolublity of highly cross-linked nanoimprint resist is a serious problem for template cleaning and liftoff process. The ability to produce high modulus,
decomposable cross-linked resist is very attractive. In this paper, we designed and synthesized a diacrylate cyclic degradable cross-linker,
2,10-diacryloyloxymethyl-1,4,9,12-tetraoxaspiro[4.2.4.2] tetradecane (DAMTT). Resists formulated with DAMTT exhibits excellent mechanicalproperties for high resolution imprint. High resolution patterns are faithfully imprinted on silicon substrates by using the degradable resist. DAMTT
incorporated with siloxane is high O2 etch resistance and is used as etch barrier to fabricate high aspect ratio structures. A lift off process could be solely
achieve by the same UV-cured resist without the assistance of the thermal plastic under layer, and it can also be used as a liftoff-layer instead of thermal
plastic polymers. The cross-linked network can rapidly hydrolyze in boiled 10% p-toluenesulfonic acid solution and foul template is completely cleaned.

(1D2-3) OVIDUCT -MIMETIC CHIP FOR SPERM S EPARATION AND OOCYTE MANIPULATION TO ENHANCETHE PROBAB ILITY OF FERTILIZATION FOR OLIGOZOOSPERMIA PATIENT …………………………………No.298

32

Hsin-Yao Tseng 1, Yu-Hsuan Huang 1, Hong-Yuan Huang 2, and Da-Jeng Yao 1
1
Institute of Nanoengineering and Microsystems, National Tsing Hua University, Taiwan
2
Department of Obstetrics and Gynecology, Lin-Kou Medical Center, Chang Gung Memorial Hospital, Taiwan
This study presents an imitation of oviduct microfluidic dielectrophoresis chip system. In this research, ICR mouse’s oocyte trapped byinsulator-structure microchannel of a dielectrophoresis system will be shown. In order to reduce the impact and destruction of cells, this study adopts
dielectrophoresis force to manipulate the cell. Imitation of In Vitro Fertilization, the natural fertilization of sperm and oocytes in the microfluidic
channel, the collision frequency between sperms and oocyte plays the success key role of the IVF. The numerical simulation software, CFDRC, was used
to reveal the position of high and low electric field distribution in microchannel. The positive dielectrophoresis response of oocyte was exhibited with thefrequency at 1 M Hz, the oocyte will move to the region with high electric field density. The pattern of insulating structure was fabricated by SU8-3050
to generate non-uniform electric field to trap oocyte with positive dielectrophoresis. Finally, the positive DEP was used to drive the position of cells in
the microchannel structures.

(1D2-4) EL ECTRO-THERMAL MICRO ACTUATORS B Y Ni-B AS ED MICROMACHINING PROCESS …………No.392
Wensyang Hsu 1, Yu-Ting Cheng 2
1
Department of Mechanical Engineering, National Chiao Tung University, HsinChu, Taiwan
2
Department of Electronics Engineering, National Chiao Tung University, HsinChu, Taiwan
Comparing to silicon-based materials, metal can provide lower resistivity and higher coefficient of thermal expansion. Here several novel electro-thermal
micro actuators developed in our group by Si-based and Ni-based micromachining process are presented, including long-short beam actuator,
long-stroke actuator, and lifted 3D actuator through micro resistance welding. Also, by incorporating nano particles in electroplating process, Ni-based
nanocomposite is found to provide even higher coefficient of thermal expansion than pure Ni to further enhance performance of electro-thermal micro
actuator.

14:15-15:30 Session: 1E2
Chair&Co-Chair:

Best Student Paper

Room EIII

Gwobin Lee & Shanhong Xia(1 E2-1) DUAL-GATE SILICON CARB IDE (SiC) LATERAL NANOEL ECTROMECHANICAL SWITCHES ………No.281
Tina He, Rui Yang, Srihari Rajgopal, Swarup K. Bhunia, Mehran Mehregany, Philip X.-L. Feng
Electrical Engineering, Case Western Reserve University, Cleveland, OH 44106, USA
We present demonstration and experimental results of four-terminal nanoscale electromechanical switches with a novel dual-gate design in a lateralconfiguration based on polycrystalline silicon carbide (poly-SiC) nanocantilevers. The switches operate at both room temperature and high temperature
up to T≈500℃ in ambient air with enhanced control over the distributed electrostatic actuation force, and also enable recovery from stiction at contact.
We have experimentally demonstrated multiple switching cycles of these nanomechanical switches with different actuation control schemes, and active
release from stiction by exploiting a repulsive mechanism. In combination with modeling of cantilever deflection, the experiments help reveal the
coupled electromechanical behavior of the device when making contact during switching operations, and suggest possible correlation between the switch
degradation observed over cycles and the elastic deformation of nanocantilevers.

(1 E2-2) A B I-STAB LE S ILICON NANOFIN NANOEL ECTROMECHANICAL SWITCH B AS ED ON VAN DER WAALSFORCE FOR NON-VOLATILE MEMORY APPLICATIONS ……………………………………………………………No.283
Bo Woon Soon 1, 2, Navab Singh 1, Julius Minglin Tsai1 and Chengkuo Lee2
1
Institute of Microelectronics, A*STAR (Agency for Science, Technology and Research), Singapore
2
Department of Electrical and Computer Engineering, National University of Singapore, Singapore
We present a silicon nanofin (Si-NF) which can be actuated bi-directionally by electrostatic force between two contact surfaces. The switch is able tomaintain its contact leveraging on van der Waals force that holds the Si-NF to either terminal without on-hold bias, thus showing a bi-stable hysteresis
behavior. The measured pull-in voltage VPI and VRESET is 10V and -12V respectively, confirming that the switch can be reset by the opposite
electrode. Since the switch toggles between two stable states, therefore it can be an ideal device for non-volatile memory (NVM) application.

(1 E2-3) THERMOEL ECTRIC PROPERTIES INVES TIGATION OF SINGLE NANOWIRES B Y UTILIZING A
THERMO ELECTRIC NANOWIRE CHARACTERIZATION PLATFORM ……………………………………………No.351
Zhi Wang 1, Johannes Ruhhammer1, Shyam Adhikari1 , Raimar Rostek1, Do minik Moser2, Oliver Paul2 , Danny Kojda3, Ruediger
Mitdank3, Saskia F. Fischer3, W illiam Toellner 4, Kornelius Nielsch 4, Michael Kroener1 and Peter Woias 1
1
Laboratory for Design of Microsystems, Department of Microsystems Engineering - IMTEK, University of Freiburg, Germany
2
Microsystems Materials Laboratory, Department of Microsystems Engineering - IMTEK, University of Freiburg, Germany
3
Novel Materials, Humboldt-Universität zu Berlin, Germany
4
Institut für Angewandte Physik, Universität Hamburg, Germany
We demonstrate the design and fabrication of a novel micromachined Thermoelectric Nanowire Characterization Platform (TNCP) which is utilized tocharacterize the thermoelectric properties of various nanowires. Single nanowire is assembled onto the pre-fabricated TNCP by means ofdielectrophoresis (DEP) in combination with a water droplet evaporation scheme. After assembly, a reliable ohmic contact is generated between the
bismuth telluride (Bi2Te3) nanowire and the underlying electrodes by means of scanning electron microscope (SEM ) focused electron beam-induced
deposition (EBID). Finally, the electrical conductivity and Seebeck coefficient of Silver (Ag) and Bi2Te3 nanowires are investigated and presented.

(1 E2-4) CONTROLLAB LE FORMATION AND OPTICAL CHARACTERIZATION OF S ILICON NANOCONE-FORESTUS ING SF6/ C4 F8 IN CYCLIC ETCHING-PASSIVATION PROCESS ……………………………………………………No.453

33

Fu-Yun Zhu, Xiao-Sheng Zhang, Wei Hu, and Hai-Xia Zhang
Science and Technology on Micro/Nano Fabrication Lab, Peking University, Beijing, China
This paper reports a nanocone-forest silicon surface fabricated by an improved DRIE process using SF6/C4F8 in cyclic etching–passivation process,which is maskless, controllable, effective and large-size. As well known, optical property of textured silicon surface is determined mainly by its surface
structure, and surface structure is determined by process conditions. In this work, process conditions during the experiment, like etching processparameters, pretreatment, uniformity control and patterned silicon etching, are tested and discussed. Based on these controllable process conditions,
nanocone-forest with an average height of 0.4~5μm, aspect ratio of 1~8 and density of 3~30 per 4μm2 formed. By analyzing the influences ofnanostructure parameters on optical property, it’s concluded that high aspect ratio, high density and small height of nanostructure could result inultra-low reflectance. The optical reflectance of two samples has been reduced to below 0.22% and 0.16% of the solar spectrum, respectively.

(1 E2-5) DES IGN AND IMPLEMENTATION OF AN ON-CHIP POLYMER MICRO BALL B EARING ………………No.165
Chih-Chun Lee1, Yu-Che Huang 2, Wen-Hsiung Hsiao 2, and Weileun Fang 1,2
1
Institute of NanoEngineering and MicroSystems
2
Department of Power Mechanical Engineering, National Tsing Hua University, Taiwan
This study presents a novel design and fabrication process to realize an on-chip micro ball bearing. The ball bearing consists of a polymer-Si-polymer
outer-race (stator), and a suspended polymer-Si-polymer inner-disk (rotor) supported by polymer micro-balls. The outer-race and inner-disk aredemolded from silicon mold, which is patterned by wet isotropic etching on double-polished 525 μm-thick silicon wafer. The liquid phase photocurable
polymer balls are dispensed by commercial dispenser with a hundred micrometer diameter tip and in-situ self-assembled in buffer liquid. Afterphotocurable polymer solidified by UV-curing, the polymer balls are confined between the outer race and inner disk. Note the ball bearing is fabricatedon a single wafer with no assembly required.

15:30-15:45

Coffee Break and Exhibition

15:45-17:00

Session:1B3

Session:1C3

Session:1D3

Session:1E3

Room

F1

M2

M3

EIII

Topic

Micro/nano Fabrication &Carbon Nanotube &Cross-Starit Ini vted Session

CM Ho Microflui dics

Metrol ogy 3

Graphen based Devices

3

Award

Chair

Joan Bausells

Jianning Ding

Rong Zhu

Chihming Ho&Co-Chair& Shiyuan Liu& Bo Cui& Shikang Fan& Gwobi n Lee

Paper ID

391,438,450,488,500,519

334,490,496,264,399,460

276,458,373,352

517,529,108,196,109

15:45-17:00 Session: 1B3
Chair&Co-Chair:

Micro/nano Fabrication & Metrology 3

Room F1

Joan Bausells & Shiyuan Liu(1B3-1) FAB RICATION OF ANISOTROPIC NANOMATERIAL B Y PRECIS E AND LARGE-AREA NANOWIREOPERATION WITH FOCUS ED-ION-B EAM ………………………………………………………………………………No.391
Luru i Zhao 1, Can Li1, Didi She1, Zhiqiang Wang 1, Jun Xu 2, Wengang Wu 1
1
National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, China
2Electron Microscopy Laboratory, Peking University, China
This paper presents a fabrication method for anisotropic nanomaterial by operating nanowires by focused-ion-beam (FIB) irradiation. After the
preparation of one-dimensional nanowire, FIB irradiation is applied on the nanowire to operate its orientation and morphology by choosing irradiation
position and area. On one hand, localized FIB irradiation is employed to precisely operate the morphology of the planar ultra-fine nanowire prepared by
FIB induced fluidization and self-perfect process driven by the material diffusion process. On the other hand, large area FIB scanning is applied toachieve the orientation adjustment of high-density nanowire bunch and nanoforest obtained by oxygen plasma etching. When nanowire is irradiated,unbalanced stress is introduced at different side, and thus nanowire bends to balance the stress. Based on this approach, both single and large area of
nanowire structure can be controlled, and anisotropic nanomaterial is realized.

(1B3-2) HIGH ASPECT RATIO ETCHING OF NANOPORES IN PECVD SiC THROUGH AAO MAS K ……………No.438
Songmei Wu 1, Marc-Oliver Bammatter1,2 , Wei Tang 2, Vaida Auzelyte1, Haixia Zhang 2, Juergen Brugger1
1
Microsystems laboratory, EPFL STI-IMT-LMIS1, Switzerland
2
National Key Laboratory on Micro/Nano Fabrication Technology, Institute of Microelectronics, Peking University, China
We present in this work the fabrication of high aspect ratio nanopores in 500 nm PECVD SiC films through AAO (anodic aluminum oxide) mask. The
initial AAO thin film is 180 nm thick and the diameter of nanopores is 33 ± 7 nm. We have used three plasma chemistries: CF4, Cl2 /Ar, and SF6/O2 tostudy the pattern transfer process into SiC at sub-50 nm scale by deep reactive ion etching. CF 4 and Cl2/Ar etchings show highly anisotropic features.
Vertical pores with similar diameter as the AAO mask (33 ± 12 nm) and as deep as 400 nm (aspect ratio >10) can be achieved by CF4 reactant. As

34

comparison, SF6 /O2 chemistry generates very different etching profiles, causing trenches both in vertical and lateral directions. Our PECVD SiC
nanopores are promising candidates for robust biosensing and nanofiltration applications.

(1B3-3) NANOSTRUCTURE FAB RICATED B Y LAS ER DIRECT WRITING WITH WATER DROPLETS …………No.450
Y. J. Chang, C. H. Chang, C. C. Ho, J. C. Hsu, C. L. Kuo
Department of Mechanical Engineering, National Yunlin University of Science and Technology, Douliou, Taiwan
Nanopatterning using near-field optics has shown great potential for industrial applications. A novel application of water droplets to this technology is
proposed in this study. With a hydrophobic layer and controlled substrate temperature, a layer of randomly distributed water droplets with a high contact
angle is formed on the substrate. These liquid droplets can be used as lenses to enhance the laser intensity at the bottom of the droplets.As a result,nanoscale holes can be formed on the substrate by laser ablation. We have fabricated holes with a diameter of 500nm at the substrate temperature of
12℃. The depth of the holes ranges from 0.1μm to 0.9μm, depending on the diameter of droplets.

(1B3-4) POLYMERIC HEMISPHERICAL PICO-LITER MICRO CUPS FAB RICATED B Y INKJ ET PRINTING …No.488
L. Jacot-Descombes, M. R. Gu llo, V. J. Cadarso, M. Mastrangeli, J. Brugger
Microsystems Laboratory, EPFL, 1015 Lausanne, Switzerland
The fabrication of precise hemispherical shape is challenging with standard planar lithography techniques. A suitable alternative is the fabrication by
inkjet printing. This paper presents a method based on drop-on-demand inkjet printing on pre-patterned silicon substrates allowing the controlled
fabrication of SU-8 hemispherical cup-like structures with inner cavities of sub-nano-liter volumes. Examples are given for cups of 100μm in diameterwith inner cavity volumes of 5pL, 20pL and 45pL. Arrays of 360 hemispherical SU-8 cups have been fabricated with a yield above 96%. The 4% ofexceptions are also described and shown as a method for achieving almost complete SU-8 spheres.

(1B3-5) NANOFABRICATION ON NON-FLAT S URFACE US ING EVAPORATED ELECTRON B EAM RES IST …No.500
Jian Zhang and Bo Cui
Department of Electrical and Computer Engineering, University of Waterloo, Waterloo, Ontario, Canada
Electron beam resist is typically applied by spin-coating, which is not suitable for coating on non-flat surfaces, such as a scanning probe cantilever or theend or side of an optical fiber. Here we present electron beam lithography result on non-flat surface (an AFM cantilever) by using polystyrene resist thatis thermally evaporated, which can thus be coated on any surface. We achieved high resolution of ~30 nm using this evaporated resist.

(1B3-6) PROTEIN MICRO/NANO-EL EMENTS FOR GREEN B IOPHOTONICS VIA FEMTOS ECOND LAS ER DIRECTWRITING ………………………………………………………………………………………………………………………No.519
Yun-Lu Sun 1, Wen-Fei Dong 1, Hong-Bo Sun 1, 2
1State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, China
2
College of Physics, Jilin University, 119 Jiefang Road, Changchun 130023, China

Protein-hydrogel-based free-form three-dimensional (3D) micro/nano-elements with „„smart‟‟ stimuli-responsiveness fabricated via femtosecond laser
direct writing (FsLDW) are rapidly emerging for their wide utility in many fields, such as bio-micro/nano-machine [1], bionics [2], and biophotonics [3,4], etc. Here, we applied the promising protein-FsLDW approach in the construction of protein-based 3D optical microdevices, for example, microlenses.
In order to meet the requirements of optical applications, processing parameters were optimized to achieve high surface quality and fine 3D morphology.
The photo-crosslinked protein microhydrogels showed a rapid and reversible swell-to-shrink behaviour once stimulated by chemical signals, by which
the protein microdevices can be dynamically tuned. Because of using protein molecules as “building blocks”, protein-based microelements were
demonstrated of fine biocompatibility. Based on the valuable characteristics, protein-based optical micro/nano-elements have great potential for
micro/nano-bio-optics and bionics, etc.

15:45-17:00 Session: 1C3
Chair&Co-Chair:

Carbon Nanotube & Graphen based Devices

Room M2

Jianning Ding & Bo Cui(1C3-1) HYDROGEN ETCHING EFFECT ON SINGLE-CRYS TAL GRAPHEN E DOMAINS …………………………No.334
Chen Liang 1,2, Wenrong Wang 1,2, Tie Li1, Yuelin Wang 1
1
Science and Technology on Microsystem Laboratory, State Key Laboratories of Transducer Technology, Shanghai Institute ofMicrosystem and Information Technology, CAS, Shanghai, China
2
Graduate School of Chinese Academy of Science, Beijing, China
In this paper, the anisotropic hydrogen etching effect on chemical vapor deposited sing-crystal graphene domains was reported. After synthesized bychemical vapor deposition on copper foils, the graphene domains were exposed to a mixed gas flow of argon and hydrogen for etching. By varying theetching temperature from 800℃ to 1050℃, hexagonal openings inside the graphene domains were found on hydrogen etched samples. The dependenceof substrate was then studied and the result indicated that copper was necessary in the etching process as catalyst. At last, etching experiments were
performed on high quality single-crystal graphene domains, and the result showed that the hexagonal single-crystal graphene domains were etched tocircular.

(1C3-2) TUNAB LE GRAPHEN E NANOMES H S EMICONDUCTOR: DES IGN, FAB RICATION, AND
CHARACTERIZATION ………………………………………………………………………………………………………No.490
Haider Al-Mu men, Fubo Rao, Lixin Dong and Wen Li
Electrical and Computer Engineering , Michigan State University, East Lansing, Michigan, USA

35

This paper reported a technique for tuning graphene semiconductor properties by introducing nanoholes into single- and few-layer graphene films. A
simple nanofabrication technique has been demonstrated for making periodic nanoholes on pristine graphene in a mask-free and time-efficient manner
via direct e-beam writing which was done by simply scanning the graphene area that is covered with EBL resist and then etching the scanned area byoxygen plasma. Parameters of e-beam lithography (EBL) (acceleration voltage, beam current, EBL resist thickness, and scanning area) were fine-tuned
to optimize the dimensions of the nanomesh. Finally, Graphene field effect transistors were fabricated and characterized experimentally.

(1C3-3) DES IGN, FABRICATION, AND CHARACTERIZATION OF GRAPHENE THERMIS TOR …………………No.496
Haider Al-Mu men, Fubo Rao, Lixin Dong and Wen Li
Electrical and Computer Engineering, Michigan State University, USA
This paper reported a new application of graphene that is graphened thermistor. M ono-layer, bi-layer and few-layer graphene devices with different
dimensions were designed and fabricated. Temperature sensing behavior of graphene has been studied in a small temperature range from room
temperature (RT) to 80ºC because this range is important in electronic instrumentations and integrated circuit design. Thermal inertia of the graphenes
was studied at a temperature of 80°C and the sensing behavior was characterized by measuring the time response of the normalized resistances. Our
preliminary results demonstrated a higher negative temperature coefficient of the bi-layer graphene those of mono-layer and few-layer graphenes. In
addition, engineered graphene resistance based on its dimension has been investigated. This technique provides a strong candidate for temperaturesensing in the micro and nano industrial applications with high reliability, high sensitivity and low cost.

(1C3-4) MICROELECTROFORMING OF A NICKEL NOZZLE PLATE FEAT URED WITH ANTI-STICTION FOR APIEZOEL ECTRIC ATOMIZ ER ………………………………………………………………………………………………No.264
Jheng-Jhih Huang, Ch in-Tai Chen
Mechanical Engineering, National Kaohsiung University of Applied Sciences, Kaohsiung, Taiwan
M icro atomizers have been popular over decades for many applications such as cooling, medical care and inkjet printing that were driven by reciprocalpiezoelectric effect. The paper presents a simple but user-friendly design for the production of a piezoelectric atomizer utilizing a nickel nozzle plate withmicro anti-stiction cavities on surface. Two PMMA substrates are specifically designed and bonded to carry out the capping, forming a micro atomizer inthe study. M icro droplets (each volume ~ 36 pl) are able to be jetted out of the fluidic nozzles with a typical diameter of ~ 30 μm by driving the backpiezoelectric plate. The thermal images of infrared thermograph into the spraying space are captured and analyzed for this cooling process.

(1C3-5) LAB EL-FREE S EPARATION AND SORTING OF HUMAN MONOCYTES AND T-CELLS B Y
EL ECTROWETTING AND DIELECTROPHORES IS ……………………………………………………………………No.399
Cheng-Yeh Huang 1, M in-Yu Ch iang 2, Sh ih-Kang Fan 3, A mir M. Ghaemmaghami4, and Wensyang Hsu 1
1
Department of Mechanical Engineering, National Chiao Tung University, Taiwan
2
Department of Materials Science and Engineering, National Chiao Tung University, Taiwan
3
Department of Mechanical Engineering, National Taiwan University, Taiwan
4
Allergy Research Group, Faculty of Medicine, University of Nottingham, United Kingdom
We report a label-free separation and sorting approach based on electrowetting-on-dielectric (EWOD) and dielectrophoresis (DEP) to manipulate humanmonocyte (THP-1) and T-cell (Jurkat) lines in droplets without any impact on cell viability. In addition to separating cells, this device provides a platform
to study cell-cell interactions and migration before the separation.

(1C3-6) A CAPILLARY-BAS ED MICROFLUIDIC DEVIC E INCORPORATING OPTICAL FIB ERS FOR FLOWINDUC ED DISPERS ION ANALYS IS ………………………………………………………………………………………No.460
Gu isheng Zhuang, Nicklas N. Poulsen, Nickolaj J. Petersen, Jesper Østergaard, Henrik Jensen
Department of Pharmacy, Faculty of Health and Medical Sciences, University of Copenhagen, Copenhagen, Denmark
In this paper, we describe a capillary-based microfluidic device utilizing flow induced dispersion analysis (FIDA) for quantitative characterization of
biomarkers. The microfluidic device is fabricated by micromilling technology and has incorporated buried optical fibers for light detection. The angle
and distance between the fiber guiding the excitation light source and the fiber collecting fluorescent emission light were optimized to enhancesignal-to-noise ratio (SNR) and limit of detection (LOD). The prototype achieves a LOD of 50 nM for the fluorescein indicator by using a low-cost
M iniature Fiber Optic Spectrometer. The FIDA-based procedure employing fluorescein as the indicator and human serum albumin (HSA) as the analyte
is carried out in the microfluidic device.

15:45-17:00 Session: 1D3
Chair&Co-Chair:

Cross-Starit Inivted Session 3

Room M3

Rong Zhu & Shikang Fan(1D3-1) IDENTIFICATION OF LIGAND-RECEPTOR B INDING AFFINITY US ING ALGAN/ GAN HIGH EL ECTRONMOB ILITY TRANSIS TORS AND B INDING-SITE MODELS ……………………………………………………………No.276
Yu -Lin Wang, Chih-Cheng Huang, You-Ren Hsu, Yen-Wen Kang
Institute of Nanoengineering and Microsystems, National Tsing Hua University, Taiwan
AlGaN/GaN high electron mobility transistors (HEMTs) were immobilized with various receptors, including antibodies, duplex DNA, and HIV reverse
transcriptase (RT) enzymes to detect ligands, including peptides, SARS proteins, and HIV drugs, respectively. Signals generated by the sensors werefitted into binding-site models and analyzed. The dissociation constants of the ligand-receptor pairs and the number of binding-sites on receptors wereresolved. The HEMTs and the models were demonstrated to be useful for drug developments and for elucidating SARS virus replication.

36

(1D3-2) DEVELOPMENT OF CMOS-MEMS LOGIC GATES ……………………………………………………………No.458
C.-Y. Tsai, T.-L. Chen, C.-M. Wu
Department of Mechanical Engineering, National Chiao Tung University, Shinchu, Taiwan
This paper presents the design and fabrication of a M EM S logic gate that can perform either NAND gate or NOR gate functions using the samemechanical structure, but different electrical interconnects. Two fabrication processes are employed to fabricate this device, which are an in-housedeveloped CMOS-compatible process and a foundry provided CMOS-MEM S process. In the line of in-house process, the experimental results confirm
the logic function of the fabricated device. In the line of foundry process, the logic function can only be verified by device’s mechanical movements
because the contact feature of the device is damaged during the fabrication process. Two methods are then proposed to tackle this problem. One uses
titanium nitride (TiN) as the contact material, the other one uses “electrode-less nickel and immersion gold (ENIG)” to deposit gold film on top ofaluminum. Both methods are underway and partial success has been observed from experimental data.

(1D3-3) FLEXIB LE POLYMER-BAS ED MANUFACTURING TECHNOLOGY FOR MICROSTRUCTURE AND ITSAPPLICATION …………………………………………………………………………………………………………………No.373
Weizheng Yuan, Zefan Shen, Chengqian Zhuang, Pengfei Zhu, Jin jun Deng, Binghe Ma
Key Laboratory of Micro/Nano Systems for Aerospace,Ministry of Education, Northwestern Polytechnical University, Xi’an, China
The purpose of this paper is to introduce flexible polymer-based manufacturing technology for microstructure and its application. Traditional
silicon-based M EM S fabrication techniques cannot meet the requirement of flexible fit for the aircraft complex surface. However, the research on
flexible thermal sensor array and fully flexible micro balloon actuator array has revealed interesting results. Through wind tunnel test, the flexible
thermal sensing belt can be applied on highly curved non-planar surfaces to measure flow with minimal invasion and the fully flexible micro balloon
actuator to achieve the goals of boundary layer separation control, lift enhancement, etc. Polymer compatible micromachining technology withconsideration of waterproof coating was developed. UAV flight test verifies the ability of maneuver control of micro actuator. In the future work,
micro sensor and actuator based on flexible polymer can be combined into a closed-loop control system, and to construct aerodynamic smart skin system
for aircraft.

(1D3-4) FAB RICATION OF COLLOIDAL CRYS TALS AND THEIR INVERS E OPALS FOR ENGINEERINGAPPLICATIONS ………………………………………………………………………………………………………………No.352
Chen-Hong Liao 1, Yu -Ting Cheng 2, Pu-Wei Wu 1
1
Department of Materials Science and Engineering,National Chiao Tung University, Hsin-chu 300, Taiwan
2
Department of Electronics Engineering,National Chiao Tung University, Hsin-chu 300, Taiwan
We demonstrate a facile fabrication scheme to produce colloidal crystals and their inverse opals in large quantity and reduced defects. The preparation
method for the colloidal crystals involves the synthesis of monodispersive polystyrene (PS) microspheres (300-800 nm) and electrophoretic deposition of
PS colloids in planar or cylindrical forms. After proper optimization of processing parameters, we are able to obtain colloidal crystals in 5×5 cm2 withadjustable layer/thickness, and their surface reveals superb uniformity. To produce an inverse structure, the colloidal crystals are used as a template toallow the electroplating of metals (Ag, Ni, Cu, Au), or oxides (ZnO) so the interstitial voids among the PS microspheres are filled. Subsequently, the PS
template is carefully removed and an interconnected porous skeleton is formed. With superb structural integrity, the inverse opals can be easily detachedfrom the substrate becoming a free-standing opaline film. M aterials characterizations including XRD, nano-indentation, porosity measurements, SEM ,electrical conductivity, and α-step are carried out. Lastly, we demonstrate several engineering applications (electrocatalysis, light-emitting diode, wetting
and electroweting on dielectric) in which the colloidal crystals and inverses opals provide clear advantages in performance improvements. In addition,
we adopt the same process in micrometer-sized channels on a silicon wafer to demonstrate universality of our fabrication scheme and explore possible
applications in M EM S applications.

15:45-17:00 Session: 1E3
Chair&Co-Chair:

CM Ho Microfluidics Award

Room EIII

Chihming Ho & Gwobin Lee(1 E3-1) INTEGRAT ED DUAL GRATING POLYMER MICROB EAMS FOR B IO-CHEMICAL S ENSING IN LIQUIDENVIRONMENT ………………………………………………………………………………………………………………No.517
Jin-yang FENG, Xiong-ying YE, Yuan-fang SHA NG, Kang WU, Feng CHEN
State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument,Tsinghua
University, Beijing 100084, China
A polymer microbeam array integrated with dual gratings for interferometric measurement was developed for biochemical sensing in liquid environment.
An Au-coated polyimide microbeam structure suspending a centered plate was designed to realize out-plane translational motion. The microbeam arraychip was fabricated on a glass substrate based on surface micromachining process. Two adjacent metal gratings corresponding to a microbeam were
patterned inside and outside of a groove with the depth of 55 nm to form a phase shift of π/2 to extend the displacement measurement range. Theinterferometric intensities from the two gratings were detected using a CCD image measurement setup and the displacement of a microbeam was
obtained by alternately using intensity signals from the two corresponded gratings. The preliminary experimental results in ethanol show that thedetection method with the polymer microbeam chip is available in liquid environment. And antibody-antigen binding detection was also carried out witha rabbit IgG immobilized chip in 100μg/ml goat anti-rabbit IgG solution.

(1 E3-2) PHYS ICAL MODULATION BAS ED CELL MANIPULATION IN MICROFLUIDIC DEVICES ……………No.529
Jing Zhu 1, Junyi Shang 1, Yuan Jia1 , Kun Liu 1,4 , David Brenner2,3, Qiao Lin 1
1
Department of Mechanical Engineering, 2Department of Radiation Oncology, and 3Center for Radiological Research, Columbia

37University, New York, NY, USA
4
School of Mechanical Engineering and Automation, Northeastern University, Shenyang, China
Cell manipulation has important applications in biological research and clinical diagnostics. We integrate microfabrication with physical modulation to
enable selective and flexible cell manipulation, such as isolation, trapping and recovery of cells. We use the strong temperature dependence of affinity
binding between aptamers and cells to enable specific capture and controlled temperature-mediated release of cells. We also exploit the large complianceof elastomers to create an array of cell-trapping microstructures, whose dimensions can be mechanically modulated to capture a predetermined numberof cells. Thus, enhanced utility and flexibility for practical applications can be attained, as demonstrated by specific capture and temperature-mediatedrelease of CCRF-CEM cells, as well as tunable trapping of MCF-7 cells.

(1 E3-3) DYNAMIC CELL ATTACHMENT OF HepG2 IN A MICROCHANNEL ………………………………………No.108
Lung-Jieh Yang 1, Chieh-Wen Lu 1, Jia-Chi Liang 1, and Hsieh-Cheng Han 2
1
Tamkang University, Tamsui, Taiwan
2
National Central University, Taoyuan, Taiwan
A dynamic filling experiment using PBS with HepG2 tumor cells is performed for observing the attachment behavior in capillaries. A PDM S
microchannel mimicking the capillary blood vessel is fabricated by the soft lithography. With treating the PDMS microchannels by different plasmas, thecorresponding surface roughness (Ra) data are experimentally measured by AFM . Using these PDM S microchannels well defined by proper Ra values,
liquid streams with microbeads and living HepG2 tumor cells are filled in, respectively. The microbead and cell attachment areas in the PDM S
microchannel have been recorded dynamically with 10 min interval. Finally, the authors qualitatively discussed the surface roughness effect on theparticle or cell attachment in a PDM S microchannel.

(1 E3-4) A S YMMETRICAL HYPERB OLIC FORMATTED MICROCHIP FOR RAPID OPTIMIZATION OF
EL ECTROPORATION …………………………………………………………………………………………………………No.196
Mengxi Wu 1, 3, Deyao Zhao 2, Hao Yan 1, Zicai Liang 2 and Zhihong Li1
1
National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, China
2
Institute of Molecular Medicine, Peking University, Beijing, China
3
Peking University Shenzhen Graduate School, Shenzhen, China
We have developed a novel microchip aiming to rapidly optimize of electric parameters for electroporation. The electrodes were designed assymmetrical hyperbolic formatted to generate linearly decrescent electric field. Cells were cultured on the microchip for adherent electroporation andin-situ observation. Exhibited diversely in cell viability and transfection efficiency, three areas were observed obviously since the intensity of electricfield was varied. Assisted by markers designed on electrodes, the location of optimal electroporation performance area and the corresponding range ofelectric field intensity were determined. Using the proposed electroporation chip, we obtained the optimal electric field spectrum for electroporation of
HEK-293A cell line, that was about 0.75 ~ 1.25 × 105 V/m. The diversity of electroporation performance was evaluated by the dependence of cell
viability and transfection efficiency on electric field intensity. With the guidance of reference electric field value, we designed a specificannular-interdigitated microchip to testify the electroporation characteristics. At last, we achieved excellent electroporation performance under the
optimal conditions using self-made electroporation microchip.

(1 E3-5) MANIPULATION OF DNA ORIGAMI NANOTUB ES IN LIQUID US ING A PROGRAMMAB LE TAPPINGMODE AFM ……………………………………………………………………………………………………………………No.109
Longhai Li1,2, Xiaojun Tian 1, Zaili Dong 1, Lianqing Liu 1 , Osamu Tabata3,4, and Wen J. Li1, 5
1State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China
2
University of Chinese Academy of Sciences, Beijing, China
3
Department of Micro Engineering, Kyoto University, Kyoto, Japan
4
Freiburg Institute for Advanced Studies (FRIAS), University of Freiburg, Freiburg, Germany
5
Deparment of Mechanical and Biomedical Engineering, City University of Hong Kong, Hong Kong, China
Deoxyribonucleic acid (DNA) origami [1] is expected to be a nanoscale functional block for Nano Electro Mechanical Systems (NEM S). It can beassembled on a substrate containing other M EM S components to realize a NEM S device in which nanostructures play an important role. We recently
demonstrated a tapping mode atomic force microscopy (AFM ) process that can manipulate DNA origami structures in liquid to desired positions with
controlled orientations, which is a novel process that will eventually allow the constructions of complex nanostructures on substrate surfaces. The
manipulation of DNA origami nanotubes with 6 nm in diameter and 400 nm in length placed on a mica substrate was executed by tapping mode AFM
with 0-10 nm amplitude. The acting vertical force from the AFM tip to a DNA origami nanotube was calculated to be 25 - 30 nN numerically by using
Simulink software (MathWorks). Experimental results shown that ~80% samples can be successfully manipulated if the tapping mode AFM tip
amplitude is 3-4 nm.

17:00-19:00

Poster and Exhibition 1 (P1): Poster Number 1P1-1P100
Details of 1P1-1P100 in page 60-78.

38

EII

Day2: Tuesday, April 9, 2013
8:30-9:15

2A1

Plenary Speaker 2: Dr. Albert (“Al”) P. Pisano(Watson Auditorium)

Chair: Zhaoying Zhou
(2A1-PS-2) HARSH ENVIRONMENT MEMS FOR ENERGY & POWER APPLICATIONS SINGLE-CHIP,
SELF-POWERED, WIREL ESS S ENSOR S YSTEMS …………………………………………………………………………No.2
Albert (“Al”) P. Pisano
University of California at Berkeley,USA
Current research and future work will be presented about extreme harsh environment, M EMS wireless sensors fabricated from silicon carbide andaluminum nitride. Harsh environment is defined as temperature at or above 600℃, pressure at or above 300 atm, and shock at or above 50,000 G. Thesesensors are being integrated with silicon carbide electronics and aluminum nitride energy harvesting devices to build a single-chip, self-powered,wireless sensor system. This wireless sensor system is applicable to power plants, geothermal energy, automobile engines, gas turbines, and otherindustrial machines that operate at high temperature. A number of thin film materials, suitable for fabrication via MEM S methods, will be described as
candidates for application to these sensors. Then, a number of sensors, both existing and under development, will be presented. Integration into siliconcarbide electronics will be addressed, and new research results for the fabrication and testing of silicon carbide electronic devices (both active andpassive) will be presented. The use of aluminum nitride as a RF component in harsh environments will be described and new results fortemperature-compensated radio filters shown. A future vision of a single-chip, self-powered, wireless sensor systems will be described.

9:15-9:45

2A2

Keynote Speaker 5: David R. S. Cumming (Watson Auditorium)
Chair: Tie Li & Juergen Brugger(2A2-KS-5) CMOS INTEGRATION AND S ENSING …………………………………………………………………………No.21
David R. S. Cu mming
Division of Electronics and Nanoscale Engineering, School of Engineering, University of Glasgow, Rankine Building, Oakfield
Avenue, Glasgow G12 8LT, United Kingdom
Complementary M etal Oxide Semiconductor (CMOS) underpins all modern microelectronics technology. Whilst dominant in computing andcommunications components and systems,CMOS has also been hugely influential in imaging technology, displacing other methods of making
semiconductor focal plane array sensors such as CCD. In this paper I will describe new developments in CMOS sensing technology, including the
CM OS proton sensing array that has growing influence in instrumentation for analytical chemistry and next generation gene sequencing. I will further
discuss new sensor technologies based on CMOS for use in terahertz imaging, and the application of emerging technologies in metamaterials and surface
plasmon resonance that are set to have a major impact on integrated sensing technologies. In so doing I will show how CMOS is now at the confluenceof many strands of research, far outside its original application domain, and how microelectronics and nanoscale engineering has an impact on some of
the most demanding technological applications of today.

9:45-10:15

2A2

Keynote Speaker 6: Isao Shimoyama (Watson Auditorium)
Chair: Tie Li & Juergen Brugger(2A2-KS-6) PIEZORES ISTIVE CANTILEV ER TYPE HIGH S ENS ITIVE DIFFERENTIAL PRESS URE S ENSOR …No.25
Hidetoshi Takahashi and Isao Shimoyama
Information and Robot Technology Research Initiative, The University of Tokyo, Tokyo, Japan
This paper reports on a differential pressure sensor using a piezoresistive cantilever. Because the three edges of the cantilever are freed up, the sensor hasa higher sensitivity than that of a traditional diaphragm sensor. Four types of the cantilever size was designed and fabricated. The highest sensitivity andresolution to differential pressure were 5.6×10-4 Pa-1, 0.028 Pa, respectively.

10:15-10:45
10:45-11:15

Coffee Break and Exhibition
2A3

Keynote Speaker 7: Mark G. Allen (Watson Auditorium)
Chair: Hans Zappe & Yao-Joe Yang

(2A3-KS-7) AN EL ECTROPLATING-B AS ED APPROACH TO VOLUMETRIC NANOMANUFACTURING AND ITSAPPLICATION TO EN ERGY CONVERS ION AND S TORAGE…………………………………………………………No.31
Mark G. A llen
School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, GA, USA
The manufacture of materials with bulk volumes and precisely controlled nanostructure has led to the creation of materials with surprising and useful39mechanical and electrical properties. Recently we have developed a ‘top-down’ technique based on sequential electroplating that allows the creation ofhighly-structured multilayer metallic materials, with precisely designed characteristic lengths in the hundreds of nanometers but volumes ofmanufactured material in the macro range. This electroplatingbased approach also enables batch fabrication of nanostructures. The fabrication relies on
automated and repeated multilayer electrodeposition of multiple metallic materials, followed by sacrificial etching of one metal. The remaining structure
consists of individualized high-lateral-aspect-ratio sub-micron metallic films. Example applications of the use of these nanostructures in energy storage
and conversion applications, including batteries and magnetic-material-based DC/DC converters, will be discussed.

11:15-11:45

2A3

Keynote Speaker 8: Hongbo Sun (Watson Auditorium)
Chair: Hans Zappe & Yao-Joe Yang

(2A3-KS-8) NANO-MICRO-ENGIN EER ED POLYMERS FOR ADVANCED APPLICATIONS ………………………No.24
Hong-Bo Sun
State Key Laboratory on Integrated Optoelectronics, College of Electronic Science and Engineering, Jilin University, China
Compared with lithographic and self-assembling nanofabrication technologies, laser nanofabrication features the reasonably high spatial resolution till
nanometers, the three-dimensional prototyping capability and eligibility applicable to various materials. In this talk, the recent research progress of thetechnology will be reported. Particular emphasis will be placed on the works conducted in our lab, such as its use for fabrication of advanced
micro-optical, micro-electronic, micro-mechanical, microfluidic, sensing and biomimetic devices and systems.

11:45-13:00

Conference Lunch (Grand Ball Room)
Poster and Exhibition 2 (P2): Poster Number 2P1-2P103

EII

13:00-15:00
Details of 2P1-2P103 in page 79-98.
15:00-16:30

Session:2B1

Session:2C1

Session:2D1

Session:2E1

Room

F1

M2

M3

EIII

Topic

Micro/nano Sensors, Actuators

Nanobi ol ogy,

Cross-Starit

Flexi ble MEMS, Sensors && Systems 1

Nano-bi o-informatics 1

Ini vted Session 4

Printed Electronics 1

Chair

Kean Aw

Yu-Cheng Lin

Linsen Chen

Haixi ong Ge&Co-Chair& Qiang bin Wang

& Yi-Kuen Lee& Lungjie Yang

& Tingrui Pan

Paper ID

407,447,455,481,489,503,515

116,120,429,486,551,442,510

556,107,88,90,41140(IS-1), 502,131,143,258

15:00-16:30 Session: 2B1
Chair&Co-Chair:

Micro/nano Sensors, Actuators & Systems 1

Room F1

Kean Aw & Qiangbin Wang

(2B1-1) SILICON CARB IDE CAPACITIVE PRESS URE S ENSORS WITH ARRAYED S ENSING MEMBRANES …No.407
Bo Meng, Wei Tang, Xuhua Peng, Haixia Zhang
Institute of Microelectronics, Peking University, China
Silicon carbide absolute capacitive pressure sensors with arrayed sensing membranes was designed and fabricated based on silicon-glass anodic bonding.
The sensing membranes consist of multiple layers of SiC/Au/SiC, making the device promising to be applied in corrosive environment. The fabricatedsensor was integrated with a capacitor read-out circuit in a size of 22 × 23 × 9 mm3, and then packaged by PDM S, which serves as the coating layer ofthe electrodes. The packaged sensor remained nearly the same linear response after 60-minutes 30% KOH etching as the one before PDM S packaging,i.e. the sensor with a 5×5 array of 100×100 μm2 square sensing membranes demonstrates a sensitivity of 0.021 pF/bar over a pressure range from 0.5 bar
to 5 bar, and then modified to 0.023pF/bar after KOH etching.

(2B1-2) CLOS E-LOOP S ELF-COMPENSATION OF THE COUPLING ERROR FOR S ILICON MICROMACHINEDGYROSCOPE ……………………………………………………………………………………………………………………No.447
Jianbin Su, Dingbang Xiao, Xuezhong Wu, Zhihua Chen, Zhanqiang Hou
College of Mechatronics Engineering and Automation, National University of Defense Technology, China
This paper presents the detailed analysis and preliminary design and experiment for close-loop selfcompensation of the coupling error for silicon
micromachined gyroscope. A closed-loop feedback control technology is adopted, which uses electrostatic force to counteract the change of coupling
stiffness. The electrostatic force is generated by the detection variation of coupling error. Comparing with the openloop detection, the experimental
results indicated evidently that the proposed method can effectively decrease the value of the coupling error, increase its stability by 38 times, while thescale factor of the microgyroscope remains unchanged.

40

(2B1-3) AN OPTIMIZED GEOMETRY MODEL FOR THE MICROMACHINED LIQUID-S USPENDED ROTORGYROSCOPE ……………………………………………………………………………………………………………………No.455
Haifeng Zhang 1,2, Nan Chen 1, Xiaowei Liu 1,2 , Xiaoshu Zhang 1, Hai Li1
1
MEMS Center, Harbin Institute of Technology, Harbin, China
2
Key Laboratory of Micro-systems and Micro-structures Manufacturing (Harbin Institute of Technology), China
The levitation of the rotor eliminates mechanical friction resulting in high sensitivity for micro-gyroscope, Theoretically. However, the rotor stability isdifficult to control due to the rotor's small size. Its performance can not rival vibratory gyroscope at present. In this paper a novel micromachined
liquid-suspended rotor micro-gyroscope is proposed, whose stability is improved by liquid suspension. The magnetic field mode of micro-gyroscope isestablished to analyze the distribution of magnetic field and calculate the driving torque of the rotor. The structure of driving stator is optimized. The
flow field model is established to optimize the rotor radius. Using optimized geometry model, the maximum rotational speed of the rotor is 23920rpm.

(2B1-4) PIEZORES ISTIVE PROB ES FOR (B IOMOLECULAR) FORCE S ENS ING ……………………………………No.481
Joan Bausells, Giordano Tosolini, Yigezu M. Birhane, Francesc Pérez-Murano
Barcelona Microelectronics Institute, IMB-CNM (CSIC), 08193 Bellaterra, Spain

We have developed self-sensing piezoresistive microcantilevers optimized for the measurement of (biomolecular) forces. Typical dimensions are 250 μm
in length, 8-20 μm in width and 450 nm in thickness, with spring constants of about 1 mN/m. The devices have been electromechanically tested on wafer
and show good force resolutions in air between 35 and 130 pN depending on the cantilever dimensions. We have also tested the electromechanicalbehavior of the cantilevers in liquid environment and we show that both the force sensitivity and the noise characteristics of the devices are notnoticeably degraded as compared with their response in air. This opens the way to the use of the cantilevers in single molecule force spectroscopy of
biomolecules.

(2B1-5) ITO NANOWIRES FOR GAS-S ENSOR APPLICATIONS ………………………………………………………No.489
M. Afshar1, E. Preiß 1, T. Sauerwald 2, D. Feili1, H. Seidel1
1
Lab of Micromechanics, Microfluidics, and Microactuators, Saarland University, Germany
2
Lab for Measurement Technology, Saarland University, Germany
In this work we have realized ITO nanowires with typical dimensions of 700 nm width and 200 µm length. They were fabricated by using a novel
approach of laser writing in a sputtered indium tin oxide (ITO) film by using a high-repetition rate near-infrared Ti:sapphire laser system based on a 85
MHz, sub-10 fs resonator. These nanowires were characterized electrically and tested as resistive gas sensors with self-heating capability. For thispurpose they were exposed to NO2 concentrations in the ppm range within synthetic air, showing a clear increase of resistance. At ambient temperature
the sensor exhibits an integrating behavior with relatively long relaxation times. It was shown that the relaxation times can be shortened by exploiting theself-heating capability of this sensor. The self-heating effect was studied by FEM simulations.

(2B1-6) MOS TUNNELING S TRAIN S ENSOR US ING AN AC MEAS UREMENT TECHNIQUE ……………………No.503
Li Zhu 1, Ruchira Dharmasena2 and Shamus McNamara1
1
Dept. of Electrical & Computer Engineering, University of Louisville, Louisville, KY, USA
2
Dept. of Physics, University of Louisville, Louisville, KY, USA
The increasing requirement for low power sensors is motivating research on new techniques. MOS tunneling sensors consume only nW of power,
compared to typical piezoresistive and capacitive sensors which consumes μW to mW. The strain was measured by measuring the tunneling current
through a M etal-Oxide-Semiconductor sandwich from a DC voltage. To overcome the electronic noise, substantial averaging was utilized. In this paper
an improved method of measuring the strain from the tunneling current is demonstrated in which an AC signal is utilized, and the AC current ismeasured. This approach substantially reduces the noise by avoiding the 1/f noise. The optimal conditions for the AC technique are to use a highfrequency to avoid 1/f noise and a low DC bias.

(2B1-7) MODE LOCALIZATION IN COUPLED Al N/SCS CANTILEVERS FOR HIGHLY S ENSITIVE RESONATINGFLOWMET ER …………………………………………………………………………………………………………………No.515
Kenji Kozuka 1 , Dong F. Wang 1,2,*, Tsuyoshi Ikehara2, Keisuke Chatani 1, and Ryutaro Maeda2
1

Micro Engineering & Micro Systems Laboratory, Ibaraki University (Faculty of Eng.), Hitachi, Ibaraki, Japan
Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME), AIST, Tsukuba, Ibaraki Japan2

The use of vibration mode localization in arrays of mechanically-coupled, nearly identical beam-shaped resonators has been studied for ultra-sensitive
mass detection and analyte identification. Our recent work (NEM S 2012) focused on enhancing the amount of amplitude change due to vibration mode
localization with a beam shaped 3-resonator array. The preliminarily results were discussed from view point of vibration characteristic by comparing
experimental results with analytical ones, without a small mass perturbation. The present study however try to apply the consequent amplitude change toresonating-based flow meter with a simplified system of beam shaped 2-resonator array (AlN/SCS). The possible application has been analytically
discussed from view point of vibration characteristic with a small mass perturbation.

15:00-16:30 Session: 2C1
Chair&Co-Chair:

Nanobiology, Nano-bio-informatics 1
Yu-Cheng Lin & Yi-Kuen Lee

41

Room M2

(2C1-1) PROTEIN SCAFFOLDED DISCRET E HYB RID NANOARCHIT ECTURES …………………………………No.116
Feng Li, Qiangbin Wang
Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou, China
Discrete nanoparticle (NP) ensembles have attracted increasing attention because of their distinct properties and potentials in fundamental researches andnovel functionalities. For example, discrete gold and silver NP dimers displayed plasmon coupling and functioned as a molecular ruler. Small molecules,
DNA, peptides, and polymers have been utilized to assemble one- and two-dimensional nanostructures. Recently, pyramid and tube conformational
nanoarchitectures have been constructed by assembling unitary or binary NPs with DNA as scaffold, opening up the possibility of building
three-dimensional (3D) NP ensembles. However, the methods suffer from low yields or poor stability or that the particle type and number in a single
ensemble cannot be easily tuned. Here we show the controllable assembling of 3D discrete nanoarchitectures of quantum dots (QDs) and gold NPs(AuNPs) with mutated virus-based NPs (VNPs) as scaffolds by simultaneous use of their inside and outside space. QDs are first encapsulated into the
icosahedral VNPs. Then AuNPs bind to the outside of the QD-containing VNPs (QD-VNPs) through interactions with rationally introduced
semi-exposed cysteines on the VNP surface. By tuning the ratio of AuNPs to QD-VNPs, we have obtained a series of hybrid nanoarchitectures in highyields, in which there is one QD at the center surrounded by a tunable number of AuNPs. Surface plasmon resonance (SPR) coupling of AuNPs andfluorescence quenching of QDs by AuNP clusters were observed in these structures. The findings demonstrate that VNPs can be a robust platform tocontrollably organize nanomaterials. The diversity in structure and size and the feasibility in structural manipulation of VNPs make this strategy versatilefor fabrication of various structures and devices.

(2C1-2) A MATERIAL AND S URFACE MORPHOLOGY INDEPENDENT MICRO ENVIRONMENT “NICHE” FOR
TISS UE ENGINEERING ……………………………………………………………………………………………………No.120
C. W. Li1 and G. J. Wang 1,2,3
1
Ph.D. Program in Tissue Engineering and Regenerative Medicine, National Chung-Hsing University, Taichung, Taiwan
2
Graduate Institute of Biomedical Engineering, National Chung-Hsing University, Taichung, Taiwan
3
Department of Mechanical Engineering, National Chung-Hsing University, Taichung, Taiwan
In vivo, the cell-cell and cell-ECM interaction contains various niches to regulate organ development. In this study, a micro environment niche, which is
independent of material and surface morphology of scaffold, for cell culture is proposed. To define the niche, a micro vibration stage is used to provide
precise vibrations on the cell culture device such that the micro shear stress niche between the material and the adhered cells can be estimated. The
cultures of bovine endothelial cells (BEC) on three different material culture plates, tissue culture polystyrene (TCPS), poly lactide-co-glycolide(PLGA), and poly lactide acid (PLA), were conducted to illustrate the proposed method. Experimental results demonstrated that the micro shear stresses
niche for BEC growth obtained from these three materials are about the same. To further verify the proposed method, the suitable reciprocating
frequencies for BEC cultured on a polydimethylsiloxane (PDM S) scaffold was estimated using the conductive shear stress obtained from the original
scaffold materials. Proliferation assay further confirmed that the BECs did proliferate well under the calculated reciprocating frequencies. It is hoped thatthe proposed micro shear stress base niche can be a more cost and time effective solution than the scaffold morphology approaches for the enhancementof cell growth.

(2C1-3) NANOFOCUS ED ELECTRIC FIELD FOR LOCALIZED S INGLE CELL NANOEL ECTROPORATION WITH
MEMB RANE REVERS IB ILITY ……………………………………………………………………………………………No.429
Tuhin Subhra Santra,C.Chiu, Nishant Agarwal, Aswin Ganatathi, Pen-Cheng Wang, Fan-Gang Tseng
Institute of Nano Engineering and Microsystems, National TsingHua University, Taiwan
Department of Engineering and System Science, National TsingHua University, Taiwan
Division of Mechanics, Research Center for Applied Sciences, Academia Sinica, Taiwan
Despite the significant research in electroporation, high electric field was applied to the whole cells resulted in permeabilizing the membrane of millions
of cells without reversibility [1]. To deliver biomolecules through the specific region of the cell membrane with high cell viability and high transfection
rate is important for various biological and therapeutic applications.This report presents a new type localized single cell membrane electroporation(LSCM EP), at specific region of the single cell withthe application of 800 μs electric pulse. The ITO nano-electrodes with 100nm thickness and 500 nm
gap between two electrodes can generate an intense electric field to track biomolecules inside HeLa cell in our studies. This small gap between two
nano-electrodes can neglect thermal effect on cell membrane and permit reversible electroporation with high cell viability (90%) and minimum effected
electroporation region (0.48 μm). Our approach successfully delivers biomolecules through a specific region of single cell with high transfection rate(82%) and high cell viability. This process, not only generates well-controlled nano-pores allowing rapid recovery of cell membrane, but also it provides
a clear optical path potentially tracking of drugs to deliver inside single cell.

(2C1-4) QUANTITATIVE ANALYS IS OF DNA MET HYLATION B AS ED ON MELTING CURVE ANALYS IS ……No.486
Pornpat Athamanolap 1, Brian Keeley 2, Dong Jin Sh in 1, Tza-Huei Wang 1, 2
1
Department of Biomedical Engineering, Johns Hopkins University, Baltimore, Maryland, USA
2
Department of Mechanical Engineering, Johns Hopkins University, Baltimore, Maryland, USA
We present a platform to quantify DNA methylation density based on double stranded DNA melting curve profiles. This method combines the approachof traditional melting curve analysis with a bioinformatics supervised learning model to allow quantitative analysis of DNA methylation in a single-tube
manner. Furthermore, melting curve analysis can be performed in a microfluidic droplet chip with a custom miniaturized real-time thermocycler. Basedon melting profiles, the presence of methylated and unmethylated DNA can be determined by their distinct melting points. In addition, the level ofcurvature at the peaks of derivative curves can be used to quantify the levels of DNA methylation density, which is unattainable by current gold standard
methods such as methylation specific PCR (M SP).

42

(2C1-5) DYNAMIC S EPARATION OF B-LYMPHOMA CELLS FROM RED B LOOD CELLS US ING
OPTICALLY-INDUCED EL ECTROKINET ICS ……………………………………………………………………………No.551
Wenfeng Liang 1, 2, Bin Liu 1, Lianqing Liu 1, Zaili Dong 1, Gwo-Bin Lee1, 3 , Wen J. Li1, 4, Weijing Zhang 5
1State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang, China
2
University of the Chinese Academy of Sciences, Beijing, China
3
Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, Taiwan
4Department of Mechanical and Biomedical Engineering, City University of Hong Kong, Kowloon, Hong Kong
5
Department of Lymphoma, Affiliated Hospital of Military Medical Academy of Sciences, Beijing, China
This study reports an approach to dynamically separate cultured human B-lymphoma (Raji) cells from normal human red blood cells (RBCs), mixed in
an isotonic solution, by utilizing a hydrogenated amorphous silicon-based optically-induced electrokinetics chip. A theoretical calculation of thepolarization model for the two different types of cells is first presented. The differential velocity between the cell types, generated as a result of the
optically-induced dielectrophoresis (ODEP) force is obtained using a finite element method. The theoretical results indicate that the two types of cells
could be separated by using the ODEP force. Experimental results verified that the two types of cells can be separated by using two optically projectedlines of different widths, with one projected line moving and the other line stationary, as the virtual electrodes for generating the ODEP force. Separationis achieved with these virtual electrodes using a bias potential of 20 Vpp at a driving frequency of 50 kHz. To the best of our knowledge, this work is thefirst experimental validation of rapid separation of Raji cells from RBCs using optically-induced electrokinetics.

(2C1-6) Al2O3/W HET ERO-STRUCTURED NANOPORE MEMBRANES:FROM NATIVE TO TUNAB LE NANOFLUIDICDIODES …………………………………………………………………………………………………………………………No.442
Songmei Wu, Fabien W ildhaber, Arnaud Bertsch, Juergen Brugger and Philippe Renaud
Microsystems laboratory, EPFL STI-IMT-LMIS, Switzerland
We present here Al2O3/W hetero-structured nanopore membranes which function as native and electrical field tunable nanofluidic diodes. A typicalmembrane is 100×100 μm2 in size with pore density of ~ 20/μm2. The nanopores are 26nm in diameter and 400 nm in length. Owing to the opposite
surface charge states of Al2O3 (positive) and W (negative with native oxide), the membrane exhibits clear rectification of ion current in electrolyte
solutions. After thermal heating at 350°C for 2 hrs, approximately 10 nm WOx grows on the surface of W,forming a conformal and dense dielectric layer.
The W layer allows the application of an electrical field to further modulate the ionic transport through the nanopores with low gate potentials and ultra
low gate leakage current. We have demonstrated the control of rectifying factor from 2 to 11. Our experimental findings have a valuable potential forcontrollable high throughput molecular separation and chemical processors.

(2C1-7) EFFECTS OF CRYS TAL DEFECTS ON THE EL ECTROKINETICS OF NANOFLUIDIC CRYS TAL …No.510
Wei Ouyang 1, Wei Wang 1, 2, Haixia Zhang 1, 2, Wengang Wu 1, 2, Zhihong Li1 , 2
1
Institute of Microelectronics, Peking University, China
2
National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Beijing, China
Nanofluidic crystal (NFC) is attracting research interest as a novel nanofluidic material due to its various advantages over traditional microfabricatednanochannels. Crystal defects form during the self-assembly of NFC. In this work, we investigated the effects of crystal defects on the electrokinetics of
NFC in the domain of micrometers (1–100 μm). We found that conductance of NFCs self-assembled in square micropores with lateral lengths of 10–90
μm all demonstrated conductance of a typical nanofluidic nanochannel. However, conductivity degraded dramatically with the increase of micropore
sizes. At low concentrations where electrical double layers (EDLs) dominated the conductivity, conductivity dropped to only 20% from 10 to 90 μm
micropores.

15:00-16:30 Session: 2D1
Chair&Co-Chair:

Cross-Starit Inivted Session 4

Room M3

Linsen Chen & Lungjie Yang

(2D1-1) S YMMETRIC TOGGL E STRUCTURED MEMS LINEAR VARIAB LE CAPACITOR WITH LARGE TUNNING
RATIO …………………………………………………………………………………………………………………………No.556
Ling Li, Chen xu Zhao, Mengwei Li, Zewen Liu
Institute of Microelectronics, Tsinghua University, China
A microelectromechanical-system (M EM S) variable capacitor with symmetric toggle structure is proposed to achieve an excellent linearity of the C-V
response and a large capacitance tuning ratio. Based on lever principle, flexible top plate of the capacitor moves upwards when applying the voltage on
the control electrodes increases, which results in a highly linear decrease of the capacitance with increasing control voltage. The proposed MEM S
variable capacitor was modeled and simulated using ANSYS software and fabricated using surface micromachining process. The results show a highlinearity factor (LF) of 96.3% in C–V response and a large tuning ratio of 160% in a low actuation voltage range from 0 V to 30 V. The LF even reaches
98.9% from 10 V to 30 V.

(2D1-2) S TEEL-BAS ED TAIL ACTUATORS FOR MICRO-AIR-VEHICLES …………………………………………No.107
Lung-Jieh Yang, Dung-Lin Jan, Wei-Chung Lin
Department of Mechanical & Electromechanical Engineering, Tamkang University, Taiwan
This work presents an animation of the sporangial motion for making bionic tail flaps of micro-air-vehicles (MAVs) regarding energy saving. A
SUS-304 steel foil of 40 μm-thick is used as the substrate and Nd-YAG laser cutting is performed to construct the surface tension-driven actuator.
Surface modification including parylene coating and oxygen plasma treatment are tried to enlarge the actuation stroke angle.

43

(2D1-3) S UB -20nm E-B EAM LITHOGRAPHY TECHNOLOGY …………………………………………………………No.88
Baoqin Chen, Qin Wang
Institute of Microelectronics, Chinese Academy of Sciences, Beijing, 100029, China
In sub-20nm structure graphical electron beam lithography, we adopt a method of the combination of high-resolution, high-contrast electron resists HSQ
and Single-line Lithography,implement thinnest 5nm Grid structure lithography. Adopt lattice structure and thin resists preventing phenomenon ofadhesion, review and collapse of high aspect-ratio pattern of nano-structure. Adopt spin-coating of the SX AR-PC5000/90.1 conductive protective
coating on surface of resists effectively inhibit influence on E-beam lithography from charge accumulation phenomenon of insulator substrates anddielectric films.

(2D1-4) ARRAYED METALLIC MICRO/NANO PARTICLES FOR LOCALIZED S URFACE PLAS MON RES ONANCEBAS ED ON METAL CONTACT TRANS FER LITHOGRAPHY ……………………………………………………………No.90
C. Y. Wu, H. Y. Chung, and Y. C. Lee
Mechanical Engineering, National Cheng Kung University, Tainan, Taiwan
This paper demonstrates a rapidly, low cost, and mass production process to fabricate arrayed metallic nano-particles on a variety of substrates. A
hexagonal arrayed metallic nanoparticles deployed on ITO/glass substrate with sub-micron periodicity is achieved. It is observed in optical transmittancemeasurements that noble metallic arrayed nano-particles deployed on ITO/glass substrate result in a spectrally narrowband of extinction in visible range,
and is in good agreement with the simulated results using finite-element method (FEM ). It is found that the narrowband extinction spectrum is associatedwith electromagnetic field coupling between the arrayed metallic nanostructures and the ITO layer. This electromagnetic field coupling induces
significant plasmon resonance in the ITO layer. Based on this observed phenomenon, optoelectronic devices with arrayed metallic nanostructures can beeasily designed and developed.

(2D1-5) FAB RICATION OF GRAPHEN E B AS ED EL ECTROTHERMAL CANTILEVER ACTUATOR ……………No.411
Yilong Zhou, Hengchang Bi, Xiao Xie, Litao Sun
SEU-FEI Nano-Pico Center, Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing, China
A novel actuator has been fabricated using graphene and graphene oxide composite paper as building blocks. The two materials have nearly equal
Young’s modulus, however a large displacement was observed during the electromechanically driven operation, which was attributed to great differencein coefficient of thermal expansion of grapheme paper and graphene oxide paper.

15:00-16:30 Session: 2E1
Chair&Co-Chair:

Flexible MEMS, Sensors & Printed Electronics 1

Room EIII

Haixiong Ge & Tingrui Pan(2 E1-1-IS-1) OVERVIEW OF FLEXIB LE AND PRINTAB LE EL ECTRONICS …………………………………………No.40
Zheng Cui
Printable Electronics Research Center, Suzhou Institute of Nanotech, Suzhou, China
Flexible and printable electronics represent a paradigm shift in electronics manufacturing, which deviates from mainstream silicon-based
microelectronics. Everything has changed, from substrate materials to electronic materials and to the way electronic devices are fabricated, except thebasic principle of electronics. This talk gives an overview on what are flexible and printable electronics, why flexible and printable, the principles behindit, the materials and fabrication issues within it, and market potential for this type of electronic products.

(2 E1-2) PARYLEN E-B AS ED FOLD-AND-BOND WIRELESS PRESS URE S ENSOR ……………………………………No.502
Brian Cru m, Wen Li
Department of Electrical and Computer Engineering, Michigan State University, USA
This paper describes the design, fabrication, and characterization of a wireless, flexible, passive pressure sensor that is suitable for long-term intraocularpressure monitoring. The integrated planar M EM S coil and the variable capacitor were constructed using a fold-and-bond technique, which avoids
multilayer processes and thus reduces fabrication complications. Parylene-C was the structural and packaging material, which ensures the flexibility andbiocompatibility of the sensor. Devices were characterized in both air and liquid environments. A pressure sensitivity of 156 kHz/mmHg and a maximum
detectable range of 28 mm were achieved in water.

(2 E1-3) WEARABLE S KIN S ENSOR US ING PROGRAMMAB LE INTERLOCKING OF NANOFIB ERS …………No.131
Kahp-Yang Suh 1, 2, Noo Li Jeon 1, 2, Changhyun Pang 2
1
World Class University Program on Multiscale Mechanical Design,2
School of Mechanical and Aerospace Engineering, Seoul National University, KOREA
We presents a highly sensitive, flexible, multiplex strain gauge sensor by utilizing single active layer of nanoscale mechanical interlocking between highaspect-ratio Pt-coated polymeric nanofibers. The sandwich-assembled, interconnected nanofibers supported on thin polydimethylsiloxane (PDM S) layers
displayed a specific strain gauge (GF) factors for multiplex sensing such as pressure, shear force, and torsion, measured from the change of electricalresistance as a function of applied compressive strain (≤ 5%). The assembled device was used to monitor continuous kinetic motion of a bouncing
micro-droplet on a superhydrophobic surface and physical force of a heartbeat under different conditions. In order to enhance adaptability on exquisite
human-skin, skin adhesive patches for in vitro diagnostic device are developed.

44

(2 E1-4) FAB RICATION OF TUNAB LE WETTING PDMS MEMBRANE B Y NANOSTRUCTURING AND PLAS MA
TREATMENT ……………………………………………………………………………………………………………………No.143
Xiao-Sheng Zhang 1, Shi-Gan Chu 1, Nicolas Peter2 , Hai-Xia Zhang 1
1
Institute of Microelectronics, Peking University, China
2
Saarland University, Saarbrücken, Germany
In this paper, we present the tunable wetting behavior of Poly(dimethylsiloxane) (PDM S) by nanostructuring and plasma treatments, which shows stablesuperhydrophobicity and superhydrophilicity. The PDM S film with high-density nanoporous was prepared by replica molding of the black siliconsurface fabricated by an improved deep reactive ion etching (DRIE) process. This simple nanostructuring can increase the roughness and reduce thesurface energy of PDM S. The conventional equipment for micro fabrication (i.e. inductively couple plasma etcher) was used to realize plasma treatment
to modify the wettability. The effects of different plasma gases on wettability are attributed to physical and chemical mechanisms, which have been
investigated by scanning electron microscope (SEM ) and energy dispersive X-ray spectroscopy (EDX), respectively. The optimized recipe was obtained
after additional chemical analysis. Eventually, the static contact angles of this PDM S membrane remarkably achieved ~160° and ~3°, respectively.
Furthermore, the recovery of wettability was reduced by nanostructuring PDM S surface.

(2 E1-5) FORMATION AND REL EAS E OF MICRO OBJ ECTS S ELF-ASS EMB LED FROM PHOTOCURABLE LIQUID
B Y MOLDING AND INKJ ET PRINTING ……………………………………………………………………………………No.258
Hsiang-Pi Huang, Tzung-Wei Tsai, Ch in-Tai Chen
Mechanical Engineering, National Kaohsiung University of Applied Sciences, Kaohsiung, Taiwan
The microfabrication of versatile small objects can be realized by droplet deposition. The paper presents an improved method for the formation of aphotocurable liquid making such micro objects. M icro droplets are inkjet-printed into the micro channels designed and transferred by another 4-inch
master wafer. One of key elements in the design involves the use of non-homogeneous substrates to effectively control the complex morphologies ofsolute deposit during the UV-light curing. The UV -cured liquid formations inside various micro channels are captured and characterized for this droplet
formation process. Shapes and morphologies of the structured objects are found to be uniform using hydrophobic PDM S (Polydimethysiloxane).

16:30-18:00

Session:2B2

Session:2C2

Session:2D2

Session:2E2

Room

F1

M2

M3

EIII

Topic

Micro/nano Sensors, Actuators

Micro/Nano Heat Transfer

Cross-Starit

Micro/nanoflui dics

& Systems 2& Energy Harvesters

Ini vted Session 5&Bio Chi ps 1

Chair

Wibool Piyawattanametha

Lishuang Feng

Yu-Lin Wang

Tza-Huei Wang

&Co-Chair& Tianling Ren& Chenyang Xue& Daoheng Sun& Yanyi Huang

Paper ID

127,184,198,256,275,305

443,325,330,339,421,424

557,463,555,54650(IS-2),110,147,167,246,252

16:30-18:00 Session: 2B2
Chair&Co-Chair:

Micro/nano Sensors, Actuators & Systems 2

Room F1

Wibool Piyawattanametha & Tianling Ren(2B2-1) OPTIMIZATION OF SILICON NANOWIRE BAS ED FIELD-EFFECT PH S ENSOR WITH B ACK GATECONTROL ………………………………………………………………………………………………………………………No.127
Anran Gao, Pengfei Dai, Na Lu, Tie Li, Yuelin Wang
*State Key Laboratories of Transducer Technology & Science and Technology on Micro-system Laboratory, Shanghai Institute ofMicrosystem and Information Technology, Chinese Academy of Sciences, Shanghai, China
A FET sensor for pH detection was developed based on CMOS-compatible silicon nanowires. Optical lithography and anisotropic self-stop etching were
employed to guarantee low cost and batch production for silicon nanowires. The pH nanosensor can detect the change of the hydrogen ion concentration
effectively. In addition, it is demonstrated that the back gate electrode can tune the nanowire detection sensitivity, which can be optimized andexponentially enhanced in the subthreshold regime. The development of a nanoscale sensor with physically engineered gates offers the possibility ofhighly parallel labeling and detection of chemical and biological molecules with selective control of individual array elements in a single integrated chip.

(2B2-2) MICROMACHINED CATALYTIC COMB USTION HYDROGEN GAS S ENSOR ……………………………No.184
Xifeng Liu 1,2 , Hanpeng Dong 1, Shanhong Xia 1
1State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing, China
2
Graduate University of Chinese Academy of Sciences, Beijing, China
A catalytic combustion H2 sensor has been fabricated by using M EM S technology. The application of hafnium oxide thin films as insulating layer has
been deposited by electron beam evaporation. The semiconductor combustion catalyst tin oxide (SnO2) layer was prepared by chemical vapor deposition(CVD).It is a novel application of semiconductor material to catalytic combustion gas sensor. The resistivity of HfO2 thin film is about 2.4×1012Ω•cm at
900℃. Both the sensing elements and the reference elements could be connected in a suitable circuit such as a Wheatstone configuration with low power
consumption. The catalytic combustion sensor shows high response to H 2 at operating voltage of 4V and has a higher relative sensitivity and a good45

linearity for the concentrations of H2 ranging from 0 to 4% in volume. Good consistency and high accuracy of the micro machined catalytic combustion
gas sensor were achieved.

(2B2-3) ULTRAS ENS ITIVE MASS DETECTION US ING DUAL- MICROCANTILEVERS COUPLED B Y CRUCIFORMOVERHANG ……………………………………………………………………………………………………………………No.198
R. Zhang, G.B. Cai, Z.Q. Wang, L.R. Zhao and W.G. Wu
National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Institute of Microelectonics, Peking University,
Beijing 100871, China
We reports the use of dual-microcantilevers coupled by cruciform overhang to enhance the mass sensitivity for minor mass detection. Driven by apiezoactuator in air, each cantilever of the structure can resonate in two different modes (in-phase and out-of-phase modes), and the resonant
amplitude-ratios are compared before and after a mass adding. Using this sensing strategy, the cross-shaped overhang of the coupled system, by
weakening the coupling effect between 2 cantilevers, provides 2 orders of magnitude enhancement in sensitivity without scaling down the cantilevers.

(2B2-4) FAB RICATION AND CHARACTERIZATION OF S URFACE-MODIFIED DRY EL ECTRODE FOR
MONITORING B I-OPOTENTIAL …………………………………………………………………………………………No.256
Yuanfang Chen, Weihua Pei, Sanyuan Chen, Shanshan Zhao, Huan Wang, Qiang Gui, Hongda Chen
State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, China
The low and stable contact impedance between the dry electrode and skin interfaces is crucial for the acquisition of high quality biopotential signal,
especially for long-term recording. Build-ing upon this fact, poly(3,4-ethylenedioxythiophene) (PEDOT), was introduced onto the surface of dryelectrode to increase the active contact area and reduce contact impedance. Silicon-based dry elec-trode (6 mm×6 mm) with pyramid-like micro-needles
was fabricat-ed by a low cost method: dicing plus etching. The electrode-to-skin contact impedance (ESCI) measured on subjects proved that dryelectrodes with PEDOT surface-modification have better electrical properties than that without PEDOT surface-modification. Besides, PEDOT
modification combined with the microfabrication process can provide a rapid, cost-effective and high-yield method to manufac-ture dry electrode.

(2B2-5) A MICROACTUATOR FOR MAGNETIC FIELD CONTROL DEVIC E WITH LARGE S HIFTING RANGE……………………………………………………………………………………………………………………………………No.275
Kun Liu 1, 2 , Yitong Cao 1, Huaiqiang Yu 1, and Zhihong Li1
1
National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, China
2
School of Computer and Information Engineering, Peking University Shenzhen Graduate School, Shenzhen, China
A large tilting angle and zero static power consumption microactuator has been designed and fabricated in order to meet the requirement of low power
consumption and remotely control systems. Analytical model and fabrication process flow of rotation actuator have been demonstrated, and static
performance has been tested and compared to theoretical data. The results show the performance of our electrostatic driven device in good agreementwith theoretical predicted model.

(2B2-6) LOW FREQUENCY ARC-BAS ED MEMS STRUCTURES FOR VIB RATION ENERGY HARVES TING …No.305
Daniel J. Apo 1, Mohan Sanghadasa2, and Shashank Priya1
1Center for Energy Harvesting Materials and Systems (CEHMS), Virginia Tech, Blacksburg VA, USA
2
Aviation and Missile Research, Development, and Engineering Center, US Army RDEC OM, Redstone Arsenal, AL, USA
This study reports the novel arc-based cantilevers for reducing the natural frequency of MEM S cantilever beams without the addition of tip/point mass.
The results show an increased potential for energy extraction from naturally occurring vibration sources. An analytical model was used to model theeffective mechanical properties of multilayered MEM S cantilevers while the natural frequencies were obtained by applying a finite element code. Results
were obtained for two geometries of arc-based cantilevers as well as their linear counterparts. These results demonstrate that arc-based cantilevers vibrate
at frequencies significantly lower than their linear components (up to 40% reduction in natural frequency).

16:30-18:00 Session: 2C2
Chair&Co-Chair:

Micro/Nano Heat Transfer & Energy Harvesters

Room M2

Lishuang Feng & Chenyang Xue(2C2-1) FLEXIB LE MEMS INDUCTORS B AS ED ON PARYLEN E-FENI COMPOUND S UBS TRATE FOR WIRELESSPOWER TRANS MISS ION S YSTEM ………………………………………………………………………………………No.443
Yang Zheng 1, Xu ming Sun 1, Zhongliang Li1 , Xiuhan Li2, Haixia Zhang 1
1
National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, China
2
School of Electronics and Information Engineering, Beijing Jiaotong University, Beijing, China
In this paper, flexible M EM S inductors based on Parylene-FeNi Compound Substrate (PFCS) were designed, fabricated and analyzed. We choose
parylene as substrate to achieve flexibility and good bio-compatibility. Then, a Ni80Fe20 magnetic film was deposited on the parylene film to form acompound substrate. Moreover, a Ni80Fe20 core was also deposited in the center of the spiral inductor to improve its performance. As the radius ofmagnetic core increased from 800um to 1200um, the maximum quality factor and the inductance increased by 288% (from 4.10 to 15.91) and 297%
(from 265.94nH to 1.06μH), respectively. If we replaced the magnetic core with magnetic array, the maximum quality factor and the inductance could
improve by 111.45% (from 6.29 to 13.30) and 102.78% (from 470.97nH to 955.05nH). Finally, the PFCS inductors were tested in experimental system.

(2C2-2) GOLD NANOPARTICLES DOPED FLEXIB LE PVDF-TRFE EN ERGY HARVES TER ……………………No.325
Dajing Chen 3, Tushar Sharma3, Yuquan Chen 1, Xin Fu 2, John X.J. Zhang 2,3

46

1

Department of Biomedical Engineering, 2Department of Mechanical Engineering,Zhejiang University, Hangzhou, China
Department of Biomedical Engineering, University of Texas, Austin, USA

3

We have successfully developed flexible thin-film energy harvesters based on gold nanoparticles doped PVDFTrFE (polyvinyledenedifluoride–
trifluoroethylene) copolymer. The thin film characteristics can be well controlled by the manufacturing process involving the spin-coating andelectrochemical deposition. We demonstrate that nanostructures in thin film piezoelectric materials increase the effective area for charge collection,
leading towards enhanced power density and reversibility. Such flexible substrate with doped nanoparticles presents a new class of platform for highefficiency, low-cost energy and sensing applications.

(2C2-3) HIGH-Q POLYIMIDE-BAS ED SPIRAL INDUCTORS WITH MAGNETIC CORE FOR RF TEL EMETRYAPPLICATIONS ………………………………………………………………………………………………………………No.330
Xu ming Sun 1, Yang Zheng 1, Zhongliang Li1 , Xiuhan Li2, Haixia Zhang 1
1
National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing 100871, China
2
School of Electronic and Information Engineering, Beijing Jiaotong University, Beijing 100044, China
This paper presents a new high quality factor (Q) and large inductance (L) stacked polyimide-based spiral inductor. Polyimide (PI) is used as thesubstrate and the insulation layer to provide good biocompatibility. To achieve multilayers, selfplanarization of PI on the surface with 10μm steps was
realized. M eanwhile, Ni80Fe20 was successfully electroplated to enhance the performance of inductors. The double-layer inductor shows a maximum Q of
12.7 and a large L of 7.078μH at 5.54MHz. Considering the area of the coil, the inductance density is as high as 62nH/mm2. Based on this inductor, thewireless power transmission (WPT) system was built and tested. The minimum attenuation is -9.4dB at 1.8MHz. With the full IC-compatible fabrication
process, this coil could be used in many implantable devices.

(2C2-4) NOVEL 3D NANOHARVES TER B AS ED ON NANO-ZnO RODS FAB RICATED B Y ELECTROSPRAYIONIZATION METHOD ……………………………………………………………………………………………………No.339
Z.H. Liu, C.T. Pan, W.C. Wang, C.C. Li
National Sun Yat-Sen University, and Center for Nanoscience & Nanotechnology, National Science Council Core Facilities
Laboratory for Nano-Science and Nano-Technology in Kaohsiung-Pingtung area, Kaohsiung, Taiwan
This study presents electrospray process (Fig. 1) with liquid solution epitaxial method to fabricate piezoelectric ZnO (zinc oxide) nanoharvester based onvertically aligned ZnO nanorod arrays, which were packaged beneath the Pt (platinum) coating nanorod arrays, and forming Pt-ZnO schottky rectifying
interface.The sol-gel particles were uniformly electrosprayed on Au (aurum)/Si (silicon) substrate, and then formed the pure hexagonal wurtzite crystal
structures as ZnO seed layer after annealing treatment at 900 °C for 1 hour (Fig. 2). Well-aligned ZnO nanorod arrays (Diameter: 100-400 nm, Height:
761-1200 nm) of high (002) c-axis preferred orientation with an excellent piezoelectricity were grown at 90 °C for 10 hours using liquid solution
epitaxial method (Fig. 3 and 4). Fig. 4(d) shows the EDX spectrum of ZnO nanorods. ZnO nanoharvester was waterproofed using polymer film (Fig. 5),
and driving by ultrasonic waves. A continuous DC voltage output (~15mV) is shown in Fig. 6.

(2C2-5) LOW-FREQUENCY VIBRATION-B AS ED EN ERGY HARVES TER US ING A PIEZOEL ECTRIC COMPOS ITE
B EAM ……………………………………………………………………………………………………………………………No.421
Lokesh Dhakar1, 2 , Huicong Liu 2, F. E. H. Tay 1, 3 and Chengkuo Lee2
1
NUS Graduate School for Integrative Sciences and Engineering, Singapore
2
Department of Electrical and Computer Engineering, National University of Singapore, Singapore
3
Department of Mechanical Engineering, National University of Singapore, Singapore
A composite beam based piezoelectric energy harvester (EH) is designed and characterized which can be used to harvest energy with low frequency
vibrations. This kind of EH is demonstrated to be 3.12 times and 1.32 times (at 0.1g) more efficient at output power generation than a standalonepiezoelectric bimorph and piezoelectric bimorph with a proof mass at the free end, respectively. The resonant frequency of the EH is reduced from 275
Hz (for standalone bimorph) to 36 Hz by using the soft spring. With the aid of spring hardening effect using a stopper, the operating bandwidth isincreased from 5.25 Hz to 16.4 Hz.

(2C2-6) IMPACT BAS ED FREQUENCY INCREAS ED PIEZOEL ECTRIC VIB RATION ENERGY HARVES TER FOR
HUMAN MOTION RELATED ENVIRONMENTS …………………………………………………………………………No.424
Miah A. Halim, Sungwon Khy m, Jae Y. Park
Micro/Nano Devices and Packaging Lab, Department of Electronic Engineering, Kwangwoon University, Seoul, 139-701, Korea
This paper presents a frequency increased piezoelectric vibration energy harvesting device where the low frequency periodic impact of a driving beamwith a horizontally extended rectangular tip makes two piezoelectric generating beams to vibrate at the same time, with their higher resonant frequencies,
producing higher power output. The dimension of the flexible driving beam was 58×4.8×1 mm3 and that of each piezoelectric generating beam withstyrene support was 15×3.5×0.8 mm3. Each generating beam of the proposed energy harvester produced a maximum peak output power of 46.51 μW
across an optimum resistive load of 200 KΩ under 4 ms-2 acceleration and was increased up to 129.15 μW while the acceleration was increased up to 6
ms-2 at an operating frequency of 12.5 Hz. The output of both generating beams with series connection doubled the overall output of the device.

16:30-18:10 Session: 2D2
Chair&Co-Chair:

Cross-Starit Inivted Session 5

Room M3

Yu-Lin Wang & Daoheng Sun(2D2-1) EL ECTRICAL-MECHANICAL COUPLING IN B ENT ZnO NANO/ MICROWIRES …………………………No.557
Xuewen Fu 1, Xiaobing Han 1, Ziyue Zhang 2, Zhuhua Zhang 2, Xin li Zhu 1, Rui Zhu 1, Jun Xu 1, Wanlin Guo 2 and Dapeng Yu 147

1

State Key Laboratory for Mesoscopic Physics, Department of Physics, 209 Chengfu Road, Peking University, Beijing 100871, China
State Key Laboratory for Mechanics and Control of Mechanical Structures, and MOE Key Laboratory of Intelligent Nano Materials
and Devices, Institute of Nano Science, Nanjing University of Aeronautics and Astronautics, 29 Yudao Street, Nanjing 210016, China

2High special/energy resolution cathodoluminescence (CL) spectroscopy enables us to make precise investigation on the optical/electronic fine structuresin nanostructures. we report a significant strain-gradient effect on energy band-gap in bent ZnO microwires with diameter of 0.3~2.5 μm. Strain-gradient
breaks the symmetry of local strain effect on energy bands as shown in uniform strained ZnO. The linear distribution of strain gradient from tensile tocompression in bent ZnO nano/microwires provides ideal conditions to address the modification of the electronic structures by strain in semiconductormaterials. Radial line scan of the CL spectroscopy along bent ZnO wires at liquid helium temperature shows very fines excitonic emission structures,
which demonstrates systematic red shift towards the increase of tensile strain, and blue shift as well as excitonic peak splitting towards the increase ofcompressive strain. Strain-gradient is found to dominate the overall red-shift of the emission energy at a pure bending configuration.

(2D2-2) EL ECTRIC-FIELD-DRIVEN NANOSCALE EL ECTROMAGNETIC ACTUATING …………………………No.463
Tien-Kan Chung
Department of Mechanical Engineering, National Chiao Tung University, Hsinchu 30010, Taiwan
In this paper, we report an electric-field-driven nanoscale electromagnetic actuating. The device consists of a lithography-patterned Ni-nanobars on topof a piezoelectric Lead-Zirconate-Titanate (PZT) thin film deposited on a silicon wafer. When an electric field is applied to the PZT film, in-plane strainsin the film are developed through the piezoelectric actuation. Due to the mechanical coupling between the PZT-film and Ni-nanobars, the strains aretransmitted to the Ni-nanobars. Through the magnetostriction, the strains transform the magnetic single-domain of each Ni-nanobar. This achieves anelectric-field-driven magnetic-domain transformation (magnetization rotation) in the Ni-nanobar. That is, nanoscale electromagnetic actuating.

(2D2-3) MICRO/NANO B UBB LES FOR MEDICAL THERANOS TICS …………………………………………………No.555
Xiao-bo Ruan 1, Fang Yang 1, Yu Zhang 1, Ning Gu 1,2
1State key laboratory of Bioelectronics, Jiangsu Laboratory for Biomaterials and Devices, Southeast University, Nanjing, China
2
Suzhou Key Laboratory of Biomedical Materials and Technology, Suzhou Institute of Southeast University, Suzhou, 215123, China
One of the great promises of clinical practice is personalized medicine, which need genetic testing and better individualize care. With the conception oftheranostics, we can improve the current paradigm and the related tools to this direction. M icrobubbles, miniature gas bubbles with a range of sizes,
could be found very useful in several areas, such as imaging enhancement and drug delivery. Herein our work on the fabrication of microbubbles withshell-embedded and surface-assembled superparamagnetic nanoparticles, called magnetic microbubbles, has been presented. To be a theranostic device,this micro-nano-complex has been shown its potential applications as the contrast agent for dual enhancement of magnetic resonance imaging (M RI) &ultrasound image (US). M icro-containers changed into bubble micro-reactors acts as the remote controlled carriers for the release of encapsulated drugs.
What’s more, the fabrication of micro-nano-liposomal bubbles with a new method by a Gas-liquid mixing device is under studying.

(2D2-4) US ING CELL ULAR ARCHITECT URE TO PREPARE NANOMATERIALS AND NANOSTRUCTURES …No.546
Chao-Min Cheng
Institute of Nanoengineering and Microsystems, National Tsing Hua University, Hsinchu 300, Taiwan
Humankind often derives guidance and inspiration from the nature, which exhibits diverse structures that enable organisms to accomplish complex
functions using highly integrated and optimized solutions. However, most designers originate without any explicit reference to nature, as direct natural
analogs do not exist for many associated technological applications. In recent years, there has been increasing interest in borrowing design concepts orinherent materials from nature to create the functional materials, structures, and systems at the small scale. I will i) outline, and ii) provide my own
perspectives on how to make functional nanomaterials and nanostructures (in advance, nanosystems) through using biologically relevant elements suchas actin filaments or microtubules (i.e., cellular structural elements), based on interests that have been significantly generated in multiple academic
communities including nanomaterials (materials science), nanotechnology (engineering, applied physics) as well as biotechnology (cell biology,
bioengineering). For example, the bottom-up approach of growing and assembling inorganic structures that have biological relevance has received muchattention. While this assembly is important, the ability to position these materials at the defined locations would introduce additional control for adiversity of applications. The use of printing methods has enabled the ability to create spatially regular patterns on surfaces with large areas.
Combining the assembly of actin filaments and printing of structures to create small-scale rods though a simple and reproducible method would provide
a new degree of freedom in studying many processes. Herein, I will first present a novel printing method to influence the polymerization of G-actin in
vitro by applying a pressure (mechanical force) on the upper surface of a fabricated stamp to regulate the dewetting process of an inorganic buffer. This
process is implemented while also controlling the evaporation rate of the solvent between the substrate and surface of the stamp. This enables thepolymerization of filamentous-based nanorods which could be controlled at specific locations and with reproducible patterns. I will then introduce thecontrol of molecular filament organization through biologically-inspired intermediates, enabling us to obtain large-area regular nanopatterns. We havestudied cultured single filamentous actins on an unmodified glass surface (hydrophilic surface) and introduced myosin-II to modify the control. We thenhave utilized an inorganic salt crystallization approach on the response of these two proteins, actin filament and myosin-II, to analyze the resultant
spatially localized patterns. Through the utilization of myosin-II and the salt crystallization approach, we are able to induce the filament orientation of63°; while without myosin-II, we induce an orientation of 90.

16:30-18:00 Session: 2E2
Chair&Co-Chair:

Micro/nanofluidics &Bio Chips 1

Room EIII

Tza-Huei Wang & Yanyi Huang(2 E2-1-IS-2) DECIPHERING THE DYNAMIC LIFE OF S INGLE CELLS THROUGH MICROFLUIDIC-ASS ISTEDMICROSCOPY AND TRANSCRIPTOME ANALYS IS ………………………………………………………………………No.50

48

Yanyi Huang
College of Engineering, and Biodynamic Optical Imaging Center (BIOPIC), Peking University, Beijing, China
M icrofluidic platforms enable quantitative analysis of biological systems which can not otherwise be executed in a traditional bench top setting [1].
Progress in quantitative image analysis has also evolved microscopy into a powerful tool for systems biology studies as automated image collection andanalysis techniques are able to quantitatively process three-dimensional image data with more and more detail. Here we present a microfluidic platform
for label-free cellular imaging and sorting with stimulated Raman scattering (SRS) microscopy. SRS microscopy is a quantitative technique which
achieves label-free imaging with chemical specificity and low background by exploiting vibrational resonances in chemical bonds [2]. M icrofluidic
technology enables precise and dynamic handling of nanoliter volumes of liquid and provides an ideal platform for single-cell processing. A SRS
microscope is integrated with a microfluidic device which can manipulate, trap and sort single cells. After sorting, single cells are prepared for gene
expression analysis. This system is used to characterize lipid metabolism by quantifying intercellular lipid droplet morphology and gene expression anddemonstrates the potential for a systems approach to studying lipid droplet biology.

(2 E2-2) DYNAMIC B EHAVIORS OF MICRODROPLETS IN CONVERGENT MICROCHANNELS UNDER THE
EFFECT OF DIEL ECTROPHORES IS ………………………………………………………………………………………No.110
Y. Yan, D.Guo, S.Z.Wen
State Key lab of Tribology, Tsinghua University, Beijing, China
The convergent microchannel is widely applied to connect microchannels with different sizes to avoid sharp changes of the flow field. It is important toinvestigate the dynamic properties in the convergent microchannel to promote the development of microdevices. Numerical simulation method is used to
study the dynamic behaviors of microdroplets in a convergent microchannel. The microchannel is embedded with electrodes and alternating current (AC)is applied on the electrodes. Under the effect of nonuniform electric field,dielectrophoresis force is defined as the driving force to manipulate themicrodroplets in the convergent microchannel. In this study, the surface tension is considered in the Navier-Stokes equations. The influence of dielectric
constant and magnitude of voltage on the dynamic behaviors of microdroplets are analyzed in details. According to the results, the velocity of the
microdroplet is proportional to the dielectric constant and voltage in the convergent microchannel. This can provide an efficient method to control thedroplet merging process during the biological or chemical experiments.

(2 E2-3) A NEW MICROPUMP US ING AMPLIFIED DEFORMATION OF RES ILIENT MEMB RANES ……………No.147
Chung-Hsien Liu and Gwo-Bin Lee
Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, Taiwan
This study presents a new, pneumatically-driven micropump made of PDMS (polydimethylsiloxane) membranes for liquid delivery. Liquid samples canbe transported by using a new mechanism generated by three oil-hydraulic chambers, which were first filled with liquid (mineral oil) and then deformedby compressed air such that an amplified deformation of the PDM S membranes can be generated for liquid transportation. Experimental results showedthat the new mechanism could be used to amplify the deformation of membranes and generate considerable pumping rates. It could be promising forautomation of microfluidic devices and systems.

(2 E2-4) MONITORING THE DIS EAS E ACTIVITY VIA THE ANTIBODY-ANTIGEN RECOGNITION IN PAPER……………………………………………………………………………………………………………………………………No.167
Hsi-Kai Wang 1,2, Cheng-Han Tsai1, 3, Chung-Tao Tang 2,4, Pi-Chun Li2, Jiun-Shyang Leou 2, Yin -Liang Tang 2,4, Hsyue-Jen Hsieh 3,
Han-Chung Wu 2, Chao-Min Cheng 1,2
1
Institute of Nanoengineering and Microsystems, National Tsing Hua University, Hsinchu 300, Taiwan
2
Institute of Cellular and Organismic Biology, Academia Sinica, Taipei 128, Taiwan
3
Department of Chemical Engineering, National Taiwan University, Taipei 106, Taiwan
4
Graduate Institute of Life Sciences, National Defense Medical Center, Taipei 114, Taiwan
Dengue fever is one of the acute flavivrus-borne infectious diseases caused by dengue virus with four serotypes. To date, there are no efficient diagnostic
tools available for monitoring the disease activity of dengue fever. It is needed to develop a diagnostic device with the characteristics of inexpensiveness,
ease-to-use and robustness for the detection of dengue fever. In this study, we have developed an ELISA-based diagnostic device prepared via wax
printing method through using filter paper. The antigens that we targeted to quantify in the buffer system were both non-structural protein 1 with thedetection limit of about 100 pg/mL and envelope protein with the diluted virus culture soup of about 100 times of serotype 2 dengue virus (only 2 μL
sample). We believe that this study would provide insight on the development of in-vitro diagnostic devices for dengue fever and various diseases in the
different divisions of medicine.

(2 E2-5) IN-PARALLEL RARE CELLS IDENTIFICATION B Y HIGH THROUGHPUT CELLS S ELF-ASSEMB LY……………………………………………………………………………………………………………………………………No.246
Jui-Chia Chang, Tsung-Ju Chen, Yu-Cheng Chang, and Fan-Gang Tseng
National Tsing Hua University, Taiwan
In this study, we present a high density cells self-assembly chip to form a dense monolayer cell array by the employment of gravity force and fluidic
force. The cancer cells can be identified in mega primary lymphocytes at the single cell level by immunofluorescence. This chip is compatible withstandard fluorescence microscopy equipment and possible to do cell culture after cell array formed.

(2 E2-6) A COMPACT DIS K (CD) MICROFLUIDIC PLATFORM FOR RAPID S EPARATION AND MIXING OF B LOOD
PLAS MA …………………………………………………………………………………………………………………………No.252

49

Bo-Sh iun Li and Ju-Nan Kuo
Department of Automation Engineering, National Formosa University, Yunlin, Taiwan
This paper presents a new lab-on-CD microstructure capable of directly separating plasma from the whole blood into different reservoirs and performing
plasma mixing functions. We propose a CD microfluidic platform, including a microchannel network consisting of a plasma separation microchannel
network and a mixer microchannel network. As the disk rotates, the centrifugal force causes the separation of blood cells and plasma because of theirdifferent densities. The blood cells enter a collection chamber, while the plasma flows to the downstream mixer microchannel network. Numericalsimulations are performed to investigate the flow characteristics and mixing performance of three CD microfluidic mixers. The results show that given
an appropriate specification of the microchannel geometry and a CD rotation speed of 1800 rpm, 90% separation efficiency is achieved for diluted blood
with a hematocrit of 6%, and a mixing efficiency of more than 92% can be obtained within 3 s at an angular frequency of 2000 rpm.

18:30-21:00

Banquet (Grand Ball Room)

Day3: Wednesday, April 10, 2013
8:30-9:15

3A1

Plenary Speaker 3: Prof. Zhonglin Wang (Watson Auditorium)
Chair: Ning Xi(3A1-PS-3) NANOGENERATORS AND PIEZOTRONICS - FROM BAS IC SCIENCE TO NOVEL APPLICATIONS …No.3
Zhong-Lin Wang 1,2
1School of Materials Science and Engineering, Georgia Institute of Technology,USA
2
Beijing Institute of Nanoenergy and Nanosystems, Chinese Academy of Sciences, China
Developing wireless nanodevices and nanosystems is of critical importance for sensing, medical science, environmental/infrastructure monitoring,
defense technology and even personal electronics. It is highly desirable for wireless devices to be self-powered without using battery. We havedeveloped nanogenerators based on piezoelectric, trioboelectric and pyroelectric effect,aiming at seeking self-sufficient power sources formico/nano-systems. The output of the nanogenerators is now high enough to drive a wireless sensor system and charge a battery for a cell phone. For
Wurtzite structures that have non-central symmetry, such as ZnO, GaN and InN, a piezoelectric potential (piezopotential) is created in the crystal byapplying a strain. Such piezopotential can serve as a “gate” voltage that can effectively tune/control the charge transport across an interface/junction;
electronics fabricated based on such a mechanism is coined as piezotronics, with applications in force/pressure triggered/controlled electronic devices,sensors,logic units and memory. By using the piezotronic effect, we show that the optoelectronc devicesfabricated using wurtzite materials can havesuperior performance as solar cell, photon detectorand light emitting diode. Piezotronics is likely to serve as a “mechanosensation” for directlyinterfacing
biomechanical action with silicon based technology and active flexible electronics.This lecture will focus on the fundamental science and novel
applications of nanogenerators and piezotronics.

9:15-10:15

3A2

Keynote Speaker 9: Taesong Kim (Watson Auditorium)
Chair: Wen J. Li & Kukjin Chun

(3A2--KS-9 ) MOLECULAR B AS ED DETECTION US ING PIEZOEL ECTRIC THIN FILM COATEDMICROCANTILEV ER …………………………………………………………………………………………………………No.28
Kyo Seon Hwang 1, Jeong Hoon Lee2, Sang Kyung Kim1 , Ji Yoon Kang 1, Tae Song Kim1
1
Center for BioMicrosystems, Korea Institute of Science and Technology (KIST), Seoul, Korea
2
Department of Electrical Engineering, Kwangwoon Univ., Seoul, Korea
We have developed piezoelectric thin film layer-embedded microcantilever which is able to quickly convert between mechanical vibration and electricalcharge inducing for the application to biological substance detection with high measuring performance. These piezoelectric driven microcantilevers
provided the application feasibility in a nanomechanical point-of-care diagnosis by enabling electrical measurement of sensor’s response signal because
it did not have to use bulky optical system. In our earlier researches, the fabricated piezoelectric cantilevers by surface and bulk micromachining process
utilized as excellent platform for biomolecules detection such as disease related proteins [1, 2], DNA with specific sequence [3], enzyme [4]. Recently,
we have tried to expand the application field in addition to biomolecule detection in liquid sample. Here, in this presentation, we are going to introduce
and propose our new approaches to several application using piezoelectric driven microcantilevers.

3A2

Keynote Speaker 10: Gwobin Lee (Watson Auditorium)
Chair: Wen J. Li & Kukjin Chun

(3A2--KS-10) OPTICALLY-INDUCED DIEL ECTROPHORES IS (ODEP) ON MICROFLUIDIC S YSTEMS FORBBIOMEDICAL/NANOTECHNOLOGY APPLICATIONS …………………………………………………………………No.23
Gwo-Bin(Vincent) Lee
Department of Power Mechanical Engineering, Institute of Biomedical Engineering, Institute of NanoEngineering and Microsystems,
National Tsing Hua University, Hsinchu, Taiwan
In recent years, optically-induced dielectrophoresis (ODEP) has been recognized as a promising technique to manipulate micro- and nano-particles andcells in biomedical applications. The traditional complicated fabrication of micro-electrodes to generate the dielectrophoresis (DEP) force can besubstituted by using “virtual” electrodes defined by a projected light beam. With the ability to catch and control a single cell or particle by using

50

appropriate optical patterns, ODEP has been developed as an enabling technique particularly in the manipulation, separation, collection, alignment,
transportation and characterization of cells/particles. In this talk, I will present several examples using ODEP on microfluidic systems for biomedical andnanotechnology applications, including micro flow cytometer, micro separator, cell lysis, cell rotation, DNA stretching and CNT alignment.

10:15-10:45
10:45-11:15 3A3

Coffee Break and Exhibition
Keynote Speaker 11: Xinxin Li (Watson Auditorium)
Chair: Fangang Tseng & Lining Sun(3A3-KS-11) EFFORTS ON THE TWO INTERFACES OF RESONANT-CANTILEV ER FOR ULTRA-S ENS ITIVE
BIO/ CHEMICAL S ENS ING ……………………………………………………………………………………………………No.30
Xin xin Li
State Key Lab of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, CAS, Shanghai, China
Different from M EM S physical sensors like pressure sensor and accelerometers, which have been well commercialized and widely applied, bio/chemical
micro/nano sensors are still under technical development. Bio/chemical sensors enclose two interfaces for molecule recognition and signal transduction,
respectively. In order to distinguish the two interfaces for improved specific selectivity and signal sensitivity. We will focus on the point and give lots ofour research examples that employ micro/nano combined resonant cantilevers as bio/chemical sensing platform for on-the-spot trace-level detection.

11:15-11:45 3A3

Keynote Speaker 12: Jianxin Wu (Watson Auditorium)
Chair: Fangang Tseng & Lining Sun(3A3-KS-12) S UZHOU INDUS TRY PARK OVERVIEW AND NANOPOLIS SUZHOU …………………………………No.32
Jian xin Wu
Suzhou Nanotech Co., Ltd. China
Suzhou Industrial Park (SIP), which is the largest cooperation project between China and Singapore, has developed to be a new city. The project started
from 1994 and now SIP is the home to over 20,000 national and multinational companies, with a strong industry base in IC, TFT-LCD, high-end
equipment, telecommunication, bio-pharmaceutical, etc. and probably the highest density of venture capitals in the world, with more than 100 VCs andPE funds. For the further development and upgrade of the current industry, SIP will focus on the nanotech and reframe itself as Suzhou Innovation Park
(SIP). Nanotech industry areas of focus include Nano M aterial, M icro/Nano-Manufacturing, Energy & Green Tech and Nano biotech. Suzhou’s focus on
nanotech innovation & commercialization follows naturally from its strengths in industry, business and commercialization partners. By the end of 2012,
SIP has attracted over 5500 nanotech related experts, entrepreneurs and engineers among 100+ nanotech companies and 20+ institutes and universities.
Now SIP is well on its way to being the most global and innovative nanotech hub in China, and intends to attract over 200 nanotech companies from allover the world and 10,000 nanotech experts within the next 3 years. SIP is actively building up whole ecosystems and value chains, so you can easily andrapidly take your nanotechnology or idea from R&D to prototyping, to commercialization. Ecosystem elements, including the Nanotech Startups,
traditional companies, research institutes and universities, Venture Capitals, are strongly encouraged and supported to cooperate together to speed up thenanotech innovation, commercialization and application, under the government support and cluster cultivation.

11:45-13:00
13:00-14:30

Session:3B1

Room

F1

Topic

Conference Lunch (Grand Ball Room)
Session:3C1
Session:3D1

Session:3E1

M2

M3

EIII

Nanobi ol ogy,

Cross-Starit Ini vted Session

Micro/nanoflui dics&Bio

Nano-bi o-informatics 2

6

Chi ps 2

Nanomedici ne

Chair

Litao Sun

&Co-Chair& Wen Li

Paper ID

548(IS-3),370,190,319

13:00-14:30 Session: 3B1
Chair&Co-Chair:

Xianting Ding

Yenwen Lu

Ting Zhang

Che-Hsin Lin& Wenhao Huang& Junbo Wang

148,369,474,507,401

176,245,182,435,194

204(IS-4), 277,294,332,387&

Nanome dicine

Room F1

Litao Sun & Wen Li(3B1-1-IS-3) INTEGRATING APTAMERS AND MICROFLUIDICS FOR B IOLOGICAL MANIPULATION ANDSENS ING ………………………………………………………………………………………………………………………No.548
Qiao Lin1, Jinho Kim1, Jing Zhu 1, J. Yang 1, John Hilton 1, ThaiHuu Nguyen 1, Renjun Pei2, Kyung-Ae Yang 2, Milan Stojanovic2
1
Departments of Mechanical Engineering and 2Medicine, Columbia University, USA
We present an overview of our efforts to integrate aptamers and microfluidic devices, including manipulation of biomolecules and cells using aptamers,
and isolation of targetbinding nucleic acids. The aptamer-based devices for target manipulation are capable of specific analyte extraction and enrichment
as well as isocratic elution, and can be coupled to biodetection systems for highly sensitive analyte detection. The microfluidic devices for isolation oftarget-binding nucleic acids demonstrate the potential for integrated selection of aptamers having predefined binding characteristics against a broad
spectrum of practically important biological analytes.

51

(3B1-2) THE NEW ANTICANCER AGENT PTX-MNPS INDUCED CELL CYCLE ARRES T AND APOPTOS IS IN
MULTIPLE MYELOMA CELLS IN VITRO …………………………………………………………………………………No.370
Cuip ing Yang 1,2, Fei Xiong 3, Yu Zhang 3, Ning Gu 3, Jun Dou 1
1
Department of Pathogenic Biology and Immunology, Medical School, Southeast University, Nanjing, China
2
Department of Pathogenic Biology and Immunology, Traditional Chinese Medicine of Jiangxi University, Nanchang, China
3
School of Biological Science & Medical Engineering, Southeast University, Nanjing, China
Although new therapies have increased the survival of multiple myeloma (MM) patients, the disease remains incurable. Recurrence of MM after therapy
suggests that it has been postulated that CD138- CD34- cells called cancer stem cells (CSCs) that would be responsible for tumor initiation and relapse.
An effective drug targeted CD138- CD34- MM CSCs need to be developed. This study aimed to investigate an inhibitory effect of anticancer agent
paclitaxel Fe3O4 magnetic nanoparticles (PTX-MNPs) on CD138- CD34- MM CSCs. CD138- CD34- cells were isolated from NCI-H929 MM cell line byimmune magnetic bead sorting method and then exposed with the M NPs (0.1µg/µl), PTX (0.6µg/µl) and PTX-MNPs (0.08µg/µl) for 24 hours. The cell
viability, apoptosis and caspases expression were respectively valuated. The isolated CD138- CD34- cells possess the characteristic of CSCs. PTX-MNPssignificantly inhibited CSC proliferation and increased expressions of caspases and resulted in CSC apoptosis. These data demonstrate PTX-MNPs as apromising anticancer agent that may contribute to future targeting therapy of MM CSCs for clinical trials.

(3B1-3) B END WAVEGUIDE WITH B ROAD BANDWIDTH AND HIGH TRANS MISSION EFFICIENCY BAS ED ON
AIR-HOLE PHOTONIC CRYS TAL …………………………………………………………………………………………No.190
Xiaoyuan Ren 1, 2, Lishuang Feng, Zhili Lin
1
Laboratory on Inertial Science and Technology, Beihang University, Beijing, 100191, China
2
Laboratory of Micro-nano Measurement-Manipulation and Physics, Beihang University, Beijing, 100191, China
Photonic crystals (PCs) have been investigated for more than 20 years since its conception was proposed. In this work, we established a novel structureof the bend waveguide which is composed of photonic crystal (PC) with triangular lattice of air-holes. By optimizing the bend structures, not only thetransmission bandwidth of the whole waveguide is greatly improved, but also the transmission efficiency is enhanced. The transmission efficiencies of
the wavelengths between 1504nm and 1586nm can reach more than 80%. The highest transmission efficiency 95% can be obtained for the wavelength of
1553nm. By simulating the transmission of the optimized bend waveguide, the light wave whose wavelength is 1553nm can propagate effectively.

(3B1-4) OBS ERVATION OF S TRONG TRANSVERS E MAGNETO-OPTICAL KERR EFFECT ON S URFACE
PLAS MONIC GRATINGS ……………………………………………………………………………………………………No.319
N. P. Ling 1, K. H. Chou 1, C. T. Jhou 1, M. H. Lai1 , T. C. Chen 1 , C. H. Lai2 , L. W. Wang 2, G. B. Lee 3,and M. C. M . Lee1
1
Institute of Photonics Technologies, National Tsing Hua University, Hsinchu, Taiwan
2
Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan
3
Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, Taiwan
Strong transverse magneto-optical Kerr effect (TMOKE) on Au/Fe/Au surface plasmon (SP) gratings is demonstrated. Via the optimal design of thisstructure, the measured Kerr parameter is 0.03, which is 3 times larger than the maximal value ever reported on a plane magneto-optical SP substrate.
Moreover, the Kerr parameter is very dispersive near the SP wavelength, which can be used for a high sensitive biosensor.

13:00-14:30 Session: 3C1
Chair&Co-Chair:

Nanobiology, Nano-bio-informatics 2

Room M2

Xianting Ding & Che-Hsin Lin(3C1-1) A NEW CARB ON NANOTUB E-B AS ED HOT-FILM S ENSOR ASSEMB LED B Y OPTICALLY-INDUCEDDIELECTROPHORES IS ………………………………………………………………………………………………………No.148
Ming-Chang Hsu and Gwo-Bin Lee*
Department of Power Mechanical Engineering, National Tsing Hua University, Hsinchu, Taiwan
M iniaturized sensors have been demonstrated by micromachining technology since late 1980s. Recently, carbon-nanotubes (CNTs) have been
extensively explored for a variety of applications since they have unique electrical and exceptional mechanical properties, which may be excellent
candidate for nano-sensors. Conductors or semiconductors can be formed with different length and diameters of CNT, multi-walled carbon nanotubes(M WCNTs) and single-walled carbon nanotubes (SWCMTs). Optically-induced dielectrophoresis (ODEP) technique has been demonstrated tomanipulate microparticles by illuminating optical patterns on a photoconductive material. The ODEP chip was formed with indium-tin-oxide (ITO) andphotoconductive amorphous silicon (a-Si). When the light was illuminated on a-Si, it could produce non-uniform electric field and generate ODEP force.
In this study, CNTs were collected between two gold electrodes by ODEP force. The pre-assembled CNTs line was further immobilized by illuminatedultraviolet light. Then, the cured polymer was ashed by the oxygen plasma. After aligning CNTs between Au electrodes, the CNTs line can be used forsensing air flow velocities while operated at a constant-current mode. A CNT-based hot-film sensor was therefore successfully demonstrated in thisstudy. This technique can be easily extended for mass-production of CNT-based hot-film sensors by using the capability of ODEP platform.

(3C1-2) ROB OTIC NANOWIRE HANDLING FOR PROTOTYPIC NEMS SWITCHING AND RESONATOR DEVICES……………………………………………………………………………………………………………………………………No.369
Malte Bartenwerfer and Sergej Fat iko w
Division Microrobotics and Control Engineering, Department of Computing Science, University of Oldenburg, Oldenburg, Germany
In this paper the usage of a nanorobotic handling technique is presented for the transfer of individual nanowires with diameters of several 100
nanometers and length of about 10 μm. Both, handling and assembly take place inside a SEM and use electron beam induced deposition (EBiD) as well52

as focused ion beam (FIB) milling. The handled nanowires are used to assembly a NEM S device, namely an electrostatic switch design and a resonator,
where the nanowire acts as switching contact and resonant component, respectively. Feasibility, working principle, reproducibility and specific values ofthe switches are investigated, as well as the conductivity of the nanowires itself.

(3C1-3) UNDERCUT EDGES FOR ROB US T CAPILLARY S ELF-ALIGNMENT IN HYBRID MICROASS EMBLY ..No.474
Ville Liimatainen, Veikko Sariola and Quan Zhou
Department of Automation and Systems Technology, School of Electrical Engineering, Aalto University, Finland

In this paper, we report capillary self-alignment of 200 μm × 200 μm square parts on matching patterns with undercut edges. The undercut edge structure
is a purely topographical feature that provides ultimate pinning for liquids of any surface tension without chemical treatment. We show contact angles
close to 180° for low surface tension liquids, and capillary self-alignment using thermally curable adhesive. Sub-micron alignment accuracy after
adhesive curing is verified in a scanning electron microscope (SEM ).

(3C1-4) MULTI-SPECTRAL CONFOCAL IMAGING PROB E …………………………………………………………No.507
Pongsak Sarapukdee1, Santi Rattanavarin 2, Nu mfon Khemthongcharoen 2, Ungkarn Jaru jareet2, Ro muald Jolivot2, Il Woong Jung 3,
Daniel López3 , M ichael J. Mandella4 , and Wibool Piyawattanametha1,2
1Advanced Imaging Research Center, Faculty of Medicine, Chulalongkorn University, Bangkok, Thailand
2
National Electronics and Computer Center, Pathumthani, Thailand
3
Center for Nanoscale Materials, Argonne National Laboratory, Argonne, Illinois, USA
4James H. Clark Center for Biomedical Engineering & Sciences, Stanford, California, United States

We developed a novel M EM S based handheld multi-spectral confocal microscope providing the maximum tissue imaging depth of 400 μm, 6 μm
transverse resolution, and the maximum speed of image collection up to 10 Hz with 200×200 image pixel size. Biological imaging performance wasdemonstrated on mouse ears and tissues of human cervix. 3D rendered images from our system is able to reveal the mouse ear blood vessels and nuclei
of epithelial cells in cervical tissue samples.

(3C1-5) MICRO PROCESS ENGINEERING OF FREES TANDING S ILICON FLUIDIC CHANNELS WITH
INTEGRATED PLATINUM THERMIS TORS FOR OB TAINING HEAT TRANSFER CORRELATIONS …………No.401
R. Roth, K. Cobry, G. Lenk, P. Woias
Laboratory for the Design of Microsystems, IMTEK , University of Freiburg, Germany
The heat transfer in silicon microchannels with integrated in-line and staggered pin fin arrays is evaluated at clearance-to-diameter ratios of 0.5 - 0.77 in
the laminar flow regime. The channels have a small width, leading to a significant influence of the channel walls on fluid flow and heat transfer. Theirinfluence is considered when measuring the temperature distribution along the channel length and the average heat transfer. For this purpose platinum
thermistors are integrated directly into the channel structures, which are released from the silicon substrate and made freestanding via deep reactive ion
etching (DRIE) and selective dicing. The measurements show that a significant portion of the fluid flows below the pin fins in the clearance bypass
region. Heat transfer correlations are developed with a new functional form that considers the strong influence of the clearance-to-diameter ratio on
overall heat transfer.

13:00-14:30 Session: 3D1
Chair&Co-Chair:

Cross-Starit Inivted Session 6

Room M3

Yenwen Lu & Wenhao Huang(3D1-1) SOME REC ENT PROGRESS IN NANO-MEAS UREMENT AND STANDARDIZATION ……………………No.176
Wenhao Huang, Yuhang Chen, Tingting Luo, Xiaoning Liu
Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei, China
Nano-measurement is one of the important fields of nanotechnology, while scanning probe microscopy (SPM) is among the most popular tools forquantitative surface characterization. In this talk, some recent progress in nano-measurement and standardization, mainly the characterizations of the drift
rate and the complex three-dimensional (3D) surface roughness, will be introduced. To improve time stability of SPM instruments, practical methods
are proposed and compared to measure the drift rates in x-, y- and z- directions, and an international standard (ISO 11039: 2012) has been alreadydeveloped. In quantitative evaluation of surface roughness by SPM, conventional reference standards, which usually have regular structures, may notthoroughly meet the requirements in calibrating the complex surface roughness measurements. As a result, we propose the adoption of 3D reference
specimens with controllable surface parameters as a supplement of the conventional standards. The design, fabrication and characterization of the
micro-/nano- scale 3D roughness specimens will be presented. In addition, possible applications of the roughness specimens will be discussed. All
these investigations can enhance the value of SPM in quantitative surface nanometrology.

(3D1-2) IMMUNOASSAY US ING AN IMPEDANCE S ENSOR WITH PANDB-MODIFIED NANOPROB LES ………No.245
Cheng-Hsin Chuang 1, Hsun-Pei Wu 1, Yao-Wei Huang 3, Cheng-Ho Chen 2, Chun-Pei Jen 3
1
Department of Mechanical Engineering, Southern Taiwan University of Science and Technology, Tainan, Taiwan
2
Department of Chemical and Materials Engineering, Southern Taiwan University of Science and Technology, Tainan, Taiwan
3
Department of Mechanical Engineering and Advanced Institute of Manufacturing for High-Tech Innovations, National Chung Cheng
University, Chia Yi, Taiwan
In this study, an impedance sensor with interdigital (IDT) electrode array was utilized for dielectrophoretic (DEP) immobilization of nanoprobes and
impedance sensing of immunoreactivity. In order to enhance the sensitivity of impedance sensing, Al2O3 nanoparticles (NPs) were modified with theconductive polymer (PANDB) for binding with antibody on the outer surface as the nanoprobes (antibody-PANDB-Al2O3 NPs). These nanoprobes were53

firstly condensed and immobilized on the IDT electrode surface by positive DEP force, then, a fluorescent protein (AF488-BSA) suspension sequentiallysyringed into flow chamber for immunosensing by impedance measurement. In addition, the experimental results of PANDB-based nanoprobes werecompared with conventional nanoprobes modified by silane-based modification. As the experimental results, the normalized impedance increases withthe concentration of BSA in the range from 1 μM to 1 nM and the sensitivity of the PANDB-based nanoprobes is higher than the silane-based
nanoprobes. Consequently, we have demonstrated a rapid and high-sensitive immunoassay based on impedance sensing with DEP force.

(3D1-3) AN INTEGRATED B IONIC MICROPUMP INSPIRED B Y WATER TRANSPORTATION IN PLANTS ……No.182
Liu Chong, Li Jing min, Zhang Kaip ing, Ke Xue, Xu Zheng
Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian, China
In this paper, a novel microfluidic pump is demonstrated. The micropump is inspired by water transportation in plants. It mimics the stomataltranspiration and negative pressure generated by a leaf to drive the water. It is mainly composed of a 250μm-thick SU-8 film with an array of
micropores, agarose gel and a flow rate control unit. The micropores in the SU-8 film mimic the stomata on a leaf. The agarose gel is used to mimic thestomata and the mesophyll cells, respectively. They consist of an “artificial leaf” which uses stomatal transpiration and negative pressure to drive water.
The flow rate control unit can change flow rate by adjusting the number of the micropores participating in transpiration. Results have shown that the flowrate can be adjusted within 0.3nl/min~2.14nl/min, and the standard deviation of flow rate can be controlled within ±5%.

(3D1-4) EL ECTRIC MICROFLUIDIC PLATFORM FOR THREE DIMENS IONAL CELL CULTURE ………………No.435
Shih-Kang Fan
Department of Mechanical Engineering, National Taiwan University, Taipei, Taiwan
In tissue engineering studies, it is essential to provide a biomimicking environment for in vitro cultivations of cells and further functional organ units(e.g., liver lobules, nephrons, pancreatic islets, and osteons). Biological tissues/organs consist of hierarchical organization of various extracellular matrix(ECM ) molecules along with spatial arrangement of cells and soluble factors. Recently, researchers culture cells in a 3 dimensional (3D) cross-linked
hydrogel which behaves as ECM offering mechanical and biochemical cues to the cells. Moreover, the shape of the photo-cross-linkable hydrogel isadjustable. The engineered geometry to the hydrogel would effectively enhance the alignment of cells and the differentiation of stem cells. However,there are some issues to be addressed to achieve highly hierarchical tissues-like structures, including it is (1) difficult shaping arbitrary geometry ofhydrogels, especially non-photo-cross-linkable hydrogels, (2) complicated to deliver highly hierarchical cell arrangements in engineered hydrogels, and(3) unable to assemble various cross-linked hydrogels containing different cells for co-culture. Here, we adapt our investigations of electric microfluidic
platform to the application of tissue engineering based on the three demonstrated features of the platform that is general to (A) fluid conductivity, (B)fluid geometry, and (C) object scale. Applying the three features, we propose to achieve: (A) generation and manipulation of various cross-linkable
prepolymer solution droplets by electrowetting-on-dielectric (EWOD) and dielectrophoresis (DEP), (B) shaping of prepolymer solution droplets by DEP,(C) arrangement of cells in prepolymer solution droplets and cross-linked hydrogel blocks by EWOD and DEP. Moreover, the platform is proposed toobtain three major goals: (1) concentrating and arranging cells on the μm scale, (2) shaping and actuating prepolymer solution droplets on the 100’s μm
scale, and (3) assembling multiple cell/hydrogel pairs for co-culture studies on the mm-cm scale.

(3D1-5) HYBRID LITHOGRAPHY S YS TEM FOR MEMS/ NEMS…………………………………………………………No.194
Linsen Chen 1, Donglin Pu 1, Jin Hu 1, Yan Ye1, Pengfei Zhu 2
Institute of Information Optical Engineering, Soochow University, Suzhou, China
2
SVG Optronics, Co., Ltd., Suzhou, China
1

M icro/nano structures are involved in MEM S/NEM S, SPs sensors, and optical devices with kinetic optical effects, which cannot be mixture fabricated on
curved surface by conventional lithography for the frozen processing in the vertical direction. In this letter, a hybrid-lithography system for micro/nano
structures is proposed, which mainly consists of a spatial light modulator (SLM ), binary phase light modulator (PLM) and UV optical head equippedwith position sensor. It is the SLM and PLM as well as auto-optical focusing (AOF) and Z-correction that make micro/nano hybrid fabrication on bended
surface available. The proposed system could automatically focus on the photoresist surface with accuracy of 0.3 μm in Z-direction and achieve
minimum feature size of 100 nm at 351 nm lithography wavelength. The obtained maximum speed of 2400 mm2/min is the fastest one in the world,when the system flying exposes with 3D navigation under the beam-tiled-flash-patterning (BTFP) scan mode.

13:00-14:30 Session: 3E1
Chair&Co-Chair:

Micro/nanofluidics&Bio Chips 2

Room EIII

Ting Zhang & Junbo Wang

(3 E1-1-IS-4) A MICROFLUIDIC S YSTEM ENAB LING CONTINUOUS CHARACTERIZATION OF SINGLE-CELL
SPECIFIC MEMB RANE CAPACITANCE AND CYTOPLAS M CONDUCTIVITY ……………………………………No.204
Yang Zhao 1, Deyong Chen 1, Hao Li1 , Yana Luo 1, Bin Deng 1, Song-Bin Huang 2, Tzu-Keng Ch iu 2, M in-Hsien Wu 2, Rong Long 3,
Junbo Wang 1, and Jian Chen 1
1State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing, China
2
Institute of Biochemical and Biomedical Engineering, Chang Gung University, Taoyuan, Taiwan
3
Department of Mechanical Engineering, University of Colorado at Boulder, Boulder, CO, USA
This paper presents a microfluidic system enabling continuous characterization of specific membrane capacitance (Cspecific membrane) and cytoplasm

54conductivity (σcytoplasm) of single biological cells. In this study, cells were aspirated through a constriction channel while cell elongations and
impedance profiles at 1 kHz and 100 kHz were measured simultaneously using microscopy imaging and a lock-in amplifier. Based on the proposed
equivalent circuit model, raw data were translated to Cspecific membrane and σcytoplasm, which were 3.67±1.00 vs. 4.53±1.51 μF/cm2 and 0.47±0.09
vs. 0.55±0.14 S/m for the kidney tumor cell line of 786-O (n=302) and the vascular smooth muscle cell line of T2 (n=216), respectively.

(3 E1-2) CONTROLLAB LE ELAS TOCAPILLARY FOLDING OF S ILICON NITRIDE 3 D STRUCTURES B Y
THROUGH-WAFER FILLING ………………………………………………………………………………………………No.277
A. Legrain, T.G. Janson, J.W. Berenschot, G.J.M. Krijnen, L. Abelmann and N.R. Tas
MESA+ Institute for Nanotechnology, University of Twente, The Netherlands
We present the controllable capillary folding of planar silicon nitride templates into 3D micro-structures by means of through-wafer liquid application.
We demonstrate for the first time hydro-mechanical, repeatable, actuation of capillary folded structures via addition or retraction of water on demand.

(3 E1-3) FLUID DYNAMICS ANALYS IS OF MAGNETICALLY ACTUATED CILIATED NANO/ MICRO STRUCTURESFOR FLOW MIXING AND PROPULS ION APPLICATIONS ……………………………………………………………No.294
Cheng-Yi Lin 1, Chia-Yun Chen 2, Ya-Ting Hu 1, Chia-Yuan Chen 1
1
Department of Mechanical Engineering, National Taiwan University of Science and Technology, Taipei, 10607, Taiwan
2
Material and Chemical Research Laboratories, Industrial Technology Research Institute, Hsinchu 31040, Taiwan
A series of cilium-like micro structures with magnetic particles embedded were fabricated for precise flow manipulation through the magnetically driven
control. A hydrodynamic analysis was performed to elucidate the underlying interaction between ciliated structures and the induced flow fields. To
fabricate ciliated structures, the micromachining method together with a casting process was employed. These ciliated structures were actuated in a
homogeneous magnetic field generated by an in-house magnetic coil system for various beating cycles inside a microchannel. Three representative signal
waveforms were created to mimic the beating nature of cilia for different flow actuating functions, such as micromixing and micropropulsion. To
investigate the flow structures of induced flow fields quantitatively, a numerical modeling method using Fluid-Structure-Interaction module was
performed. In addition, a micro-particle image velocimetry (μPIV) experiment was conducted to characterize the nonreciprocal movement of ciliatedstructures for the quantification of hydrodynamic efficiency. By means of the presented analysis paradigms, a new flow manipulation strategy will besuggested to transport/agitate flows efficiently in microfluidics.

(3 E1-4) MEMS MODELING OF THE POSTERIOR S EMICIRCULAR CANAL FOR TREATING B ENIGN PAROXYS MALPOSITIONAL VERTIGO ……………………………………………………………………………………………………No.332
Deepan Kishore Ku mar1, Ano mit ra Banerjee2 , Sundaram Swaminathan 3, Mustafa Mahesri4
1
Department of Electrical and Electronics Engineering, BITS Pilani, Dubai Campus, United Arab Emirates
2
Department of Mechanical Engineering, BITS Pilani, Dubai Campus, United Arab Emirates
3
Department of Electronics and Instrumentation, BITS Pilani, Dubai Campus, United Arab Emirates
4
Specialist ENT Surgeon, Prime Medical Center, Deira, United Arab Emirates
In this paper, we study the Posterior Semicircular Canal of the Peripheral Vestibular system containing moving Otoconia (Calcium Carbonate crystals)
which leads to the condition of Benign Paroxysmal Positional Vertigo (BPPV). Using the governing equations of the affected semicircular canal wedevelop a novel M EM S device to mimic the pathophysiological condition wherein the kinocilia structure is modeled using PZT-2 micro-cantileverplaced at various positions in the device to sense the position of the otoconia. The deflection produces a voltage of 0.416 mV indicating the proximity ofthe particles. Using this information we describe a functional block of this device that aids in treating BPPV via an audio assisted CRP.

(3 E1-5) A CHAOTIC B UBB LE MIXER MICROFLUIDIC DEVICE FOR RAPID DET ECTION OF B LADDER CANCERUS ING B EAD-B AS ED ELIS A ………………………………………………………………………………………………No.387
Chia-Chu Wang 1,3, Yen-Heng Lin 1,2,3, Kin-Fong Lei1,31Department of Electronic Engineering, Chang Gung University, Taoyuan, Taiwan
2
Biosensor Group, Biomedical Engineering Research Center, Chang Gung University, Taiwan
3
Graduate Institute of Medical Mechatronics, Chang Gung University, Taoyuan, Taiwan
We proposed a simple method for rapid fluid mixing by generating tiny bubble in the fluid. The tiny bubble is levitated by the buoyancy force from thebottom of the chip and thus enhances the fluid convection. A natural wood with pore size of around 100 nm was used to disperse air to micro-bubble in
the fluid. The proposed bubble-induced micro-mixer was applied for the measurement of a bladder cancer biomarker, APOA1 through the magnetic
bead-based ELISA. Experimental data show that it greatly shorts the incubation time of the ELISA from 60 min to 8 min. In addition, the detection rangeof biomarker reaches 9000 ng/ml without any dilute process, which is around 40 times larger than the range of using 96-well ELISA with the same kit.
Furthermore, the detection limit is 5 ng/ml that is smaller than the cutoff value (11.16 ng/ml) of bladder cancer patient. The proposed method is
promising for point-of-care system.

14:30-15:30

Session:3B2

Session:3C2

Session:3D2

Session:3E2

Room

F1

M2

M3

EIII

Topic

Micro/nano Sensors, Actuators

Integration & Applicati on

Cross-Starit Ini vted Session

Flexi ble MEMS, Sensors

55

& Systems 3

of M/NEMS

7

and Printed Electronics 2

Chair

Wenji ang Shen

Lianqing Liu

Da-Jeng Yao

Dong Sun&Co-Chair& Dongfang Wang

& Hai dong Liu& Wei Wang

& Cheng Hsin Chuang

Paper ID

322,324,381,393

186,200,345,362,390

340,402,550

466,371,300,280,501

14:30-15:30 Session: 3B2
Chair&Co-Chair:

Micro/nano Sensors, Actuators & Systems 3

Room F1

Wenjiang Shen & Dongfang Wang

(3B2-1) COMPARATIVE STUDY OF A HIGH PRESS URE S ENSOR WITH RECTANGULAR DIAPHRAGM ……No.322
Z. Niu, Y. L. Zhao, B.Tian, F. F. Guo
State Key Laboratory for Manufacturing Systems Engineering, Institute of Precision Engineering, School of Mechanical Engineering,
Xi'an Jiaotong University, Xi’an, China
This paper describes a comparative study between two kinds of high pressure sensors with rectangular diaphragm structure. In order to prove results ofthe study, the stress distributions of the rectangular membrane structure sensors were presented in this article. The stress distribution of thepiezoresistance on the membrane was analyzed by the Finite Element Method (FEM) utilizing the ANSYS software. The two kinds of rectangularmembrane structure sensors were fabricated with consistent process. The results of the comparative analysis indicate that the improvements of thesensing unit structure can enhance the sensitivity of the high pressure sensor and extend the measurement range of the sensor. M eanwhile, the accuracy
requirement from double-sided lithography alignment is relatively low, which could ensure the rate of yield.

(3B2-2) LOW-STRESS PACKAGING FOR A MEMS ATMOSPHER E PRESS URE S ENSOR ………………………No.324
Mengying Zhang 1,2, Zhan Zhao 1, Lidong Du 1, Zhen Fang 1
1State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing, China
2
University of Chinese Academy of Sciences, Beijing, China
In this paper, a kind of plastic packaging for a M EM S pressure sensor is introduced. The materials and parameters of the packaging are selected andoptimized to reduce additional stresses from packaging system so as to improve stability of the device. The packaging system is designed according todimensions and functions of a kind of silicon piezoresistive pressure sensor. We choose silicon rubber as adhesive to bond chips onto lead-frames insteadof epoxy to reduce stresses caused by thermal mismatch. Silicon gel is used to fill in the capsule to protect chip and wires, and the characters of thematerials are studied for better stability.

(3B2-3) A TUNAB LE METAMATERIAL ABSORB ER EMPLOYING MEMS ACTUATORS IN THZ REGIME …No.381
Tianyang Yang, Xiuhan Li, Wangqiang Zhu
Institute of Electronic and Information and Engineering, Beijing Jiaotong University, CHINAAs M icro-electromechanical Systems (M EMS) fabrication and actuation methods are very suitable to realize the tunability of metamaterials in terahertz
regime, a kind of tunable metamaterial absorber based on MEM S techniques is proposed in this paper. Firstly, an improved electric ring resonator (ERR)
absorber model is put forward and the geometrical parameters are optimized to improve the absorption characteristics. Then the feasible fabrication
method of the movable ERR structure is discussed. By employing M EM S actuators the frequency of absorption peak is tunable. A simulated full width at
half maximum (FWHM ) absorbance of 4% is achieved and the simulation results demonstrate a peak absorbance greater than 98% at the whole tunablefrequency range from 1.08 THz to 1.20THz.

(3B2-4) CONTACTLESS RF MEMS SWITCH US ING PZT ACTUATION ……………………………………………No.393
Tim Giffney 1, Miao Yu 2, K.C. Aw1 , Haixia Zhang 2
1
Department of Mechanical Engineering, University of Auckland, New Zealand2
Institute of Microelectronics, Peking University, China
RF M EM S devices are competitive for handling high frequency microwave signals. In comparison to semiconductor devices, the performance of RF
MEM S devices is highly linear, minimizing signal distortion. A contactless piezoelectric RF MEM S switch has been designed and simulated. Due to theuse of a contactless design based on variable capacitance the reliability issues affecting contacting-type M EM S switches are avoided. The structure ispiezoelectrically actuated using a sputtered lead zirconate titanate (PZT) layer. Finite element simulation has been conducted to optimize the structure.
Electrical simulation predicts that, by achieving an on-off capacitance ratio greater than 10, isolation will exceed 15 dB over the frequency range from 4
to 15 GHz. Preliminary isolation measurements on fabricated devices without the actuating layer showed 26 dB isolation at 4 GHz, similar to thatmodeled, although isolation did not decrease by the modeled trend at high frequencies approaching 15 GHz.

14:30-15:30 Session: 3C2
Chair&Co-Chair:Integration & Applicationof M/NEMS

Room M2

Lianqing Liu & Haidong Liu(3C2-1) S IMULATION ON HEAT TRANS FER OF THE LIGHT SWITCHAB LE MICROELECTRODE ARRAY FOR
RETINAL PROSTHES IS ……………………………………………………………………………………………………No.186

56

Tiancong Wang, Xiny i Zhang and Zhihong Li
National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, China
The Light Switchable M icroelectrode Array (LSEM A) is a novel retinal prosthetic device, which has been proposed by our group previously. In thispaper, the temperature rise of the LSM EA during the operation, which is of great importance to its biocompatibility, is simulated with COM SOL
Multiphysics. We obtain both stationary and transient simulation results of current density distribution and related Joule heating. The results prove thatthe rise of temperature is small enough to avoid heat degeneration when implanted in vivo.

(3C2-2) TISS UE MORPHOLOGY CONTROLLED B Y MICROPATTERNING AND S ELF-ASS EMB LY OF VASCULARMES ENCHYMAL CELLS ……………………………………………………………………………………………………No.200
Ting-Hsuan Chen 1,2, Leiting Pan 3 , Xiaolu Zhu 4,5, and Ch ih-Ming Ho 4
1
Department of Mechanical and Biomedical Engineering, 2School of Creative Media, City University of Hong Kong, Hong Kong
3
Key Laboratory Of Weak-Light Nonlinear Photonics, Ministry Of Education, TEDA Applied Physics School and School ofPhysics, Nankai University, Tianjin, China
4
Mechancial and Aerospace Engineering Department, University of California, Los Angeles, USA
5
School of Mechanical Engineering and Jiangsu Key Laboratory for Design, Southeast University, Nanjing, China
Creating patterns of constituent ingredients are essential for tissue regeneration. Using vascular mesenchymal cells (VM Cs) which spontaneously
aggregate into multicellular structure, we demonstrate a M EM S-based method to direct the assembly of VMCs into desired tissue patterns. Incorporating
the inherent chirality of VM Cs revealed by micro-engineered substrates, differences in initial cell plating can be amplified into the formation of exquisite
radial structures resembling the crosssectional structure of liver lobules. Furthermore, when cocultured with VM Cs, vascular endothelial cells (ECs)tracked with the VM Cs and formed a coherent radial pattern, indicating the applicability to heterotypical cell organization. We envision method has
broad implications for building instructive microenvironment for tissue engineering.

(3C2-3) MICRO-FABRICATED MULTI-RESONANT CAPACITIVE SWITCH FOR UWB APPLICATIONS ……No.345
Min K. Yoon, Seong J. Cheon, and Jae Y. Park
Department of Electronic Engineering, Kwangwoon University, Seoul, Korea
In this study, a micro-fabricated multi-resonant capacitive switch with high isolation was successfully designed and fabricated for ultra wide band
(UWB) system ranging from 3- to 10-GHz. To achieve the high isolation and wide frequency bandwidth, three capacitive shunt membranes and meander
inductors were utilized to design the switch with three LC resonant switching circuits. And also, aluminum nitride film (AlN) was applied to increase
on/off capacitance ratio of the micro-fabricated capacitive switch. The dielectric constant and tangent loss of the AlN film were 8.8 and 0.008,
respectively. The measured on-state and off-state capacitances of each capacitive shunt switch were approximately 52 fF and 3.1 pF. The capacitanceratio was approximately 59. The fabricated resonant switch exhibited the high isolation of over 30dB at the frequencies ranging from 5- to 10-GHz and
70 dB at 6.5GHz. The size and volume of the fabricated switch were approximately 1.4 × 1.7 × 0.0083 (H) mm3.

(3C2-4) PARAMETRIC RES EARCH OF MEMS SAFETY AND ARMING S YSTEM …………………………………No.362
Wang Fufu, Lou Wenzhong, Fu Yue, Wang Ying
State Key Laboratory of Mechatronics Engineering and Control, Beijing Institute of Technology, Beijing, China
In this paper, a planar-zigzag-type multi-slot S&A system has been proposed. The system consists of the M EM S W-type micro-spring, slider and zigzag
slot. Through simulating and analyzing the micro-spring by applying ANSYS, establishing the mathematical model of the motion for the slider andsimulating the physical model by the non-linear dynamic mechanics, appropriate M icro-spring, slider and zigzag slot are designed to meet two items, one
item is the micro-spring doesn’t have plastic deflection under the drop overload conditions to ensure safety of the system; the other item is the slider
slides to the bottom under the launch overload conditions to ensure arming of the system. Through the experiment, the feasibility of this is confirmed.

(3C2-5) S TUDY OF AS IC S ELF-DES TRUCTION TECHNOLOGY B AS ED ON MEMS INITIATOR …………………No.390
Zhao Yue, Li Kang, Lou Wenzhong, Li Dongguang, Miao Zhihui
National Key Laboratory of Mechatronics Engineering and Control, Beijing Institute of Technology, China
School of Electronic and Optical Engineering, Nanjing University of Science and Technology, China
MEM S initiator has been developed rapidly for its low detonating power and small volume. M EM S metal bridge as one type of the MEM S initiators,
which has the same process with ASIC (Application-specific integrated circuit). In this paper, one novel ASIC self-destruction technology in chip level
mainly based on M EM S metal bridge initiator is presented. A typical experimental structure was designed. Based on this structure, a simulation model
was built. Through the simulation, when the MEM S metal bridge made by proper material was excited by pulse current, the circuits of the ASIC could bedestroyed immediately because of the electric blasting produced by excited metal bridge. The conclusion was that the self-destruction technology canachieve the self-destruction of ASIC in chip level.

14:30-15:30 Session: 3D2
Chair&Co-Chair:

Cross-Starit Inivted Session 7

Room M3

Da-Jeng Yao & Wei Wang

(3D2-1) EL ECTROSPUN PVDF NANOFIB ERS AND APPLICATIONS …………………………………………………No.340
Daoheng Sun, Tingping Lei, Yuanzhe Su, Xiaochun Qiu, Lingyun Wang, Dezh i Wu, Gaofeng Zheng
Dept. of Mechanical and Electrical Engineering, Xiamen University, China

57

PVDF nanofibers has potential wide applications because of its unique characteristics. Electrospinning is a natural nanofiber fabrication process forrealizing the phase transition and polarization which is the fundamentals of the piezoelectric effect. PVDF nanofibers electrospinning process, process
induced phase transition, energy transducing effect and some application examples are presented in the presentation. PVDF nanofibers with
piezoelectric effect could be spun directly through both conventional electrospinning (Far-field Electrospinning, FFES) and Near-Field Electrospinning(NFES). In order to analyze the mechanism of the piezoelectric effect generation, mechanical spinning and mechanical drawing process was also
investigated. Vibration—piezoelectricity transducer based on nanofibers mat was fabricated, and the measured results show that some processparameters such as solvent ratio pays important role in the transduction efficiency. As application examples, pressure sensor, battery separator based on
the PVDF nanofibers are given. The properties of the sensor and the separator are also talk about.

(3D2-2) MELTING ANALYS IS US ING B EAD-BAS ED MICROFLUIDICS FOR S INGLE NUCLEOTIDEPOLYMORPHIS M DET ECTION ……………………………………………………………………………………………No.402
Yen-Wen Lu 1, Sh ih-Torng Ding 2, En-Chung Lin 2, Lon (Alex) Wang 3, Pei-Chun Kao 1, Kan-Ch ien Li1
1
Department of Bio-Industrial Mechatronics Engineering, 2Department of Animal Science and Technology, 3Department of ElectricalEngineering, National Taiwan University, Taipei, Taiwan
A miniaturized genotyping system was developed by using a bead-based microfluidic device and conducting melting analysis on the target DNA
samples. The system offered a rapid genotyping scheme, which utilizes commonly-used microbeads conjugated to designed probes with gene targets
forming a duplex for DNA melting analysis. Ataxia-telangiectasia mutation (ATM) gene, which had proven to be a major bio-marker associated withreproductive performance, was used to demonstrate the applications of our system by using the results from melting analysis in SNP detection.

(3D2-3) COOLING STIMULATION ON CEREB RAL CORTEX FOR EPILEPS Y S UPPRESS ION WITH INTEGRATIONOF MICRO-INVASIVE EL ECTRODES AND TE COOLERS ……………………………………………………………No.550
Jin-Chern Chiou 1, 2, Lei-Chun Chou 1, Shang-Wei Tsai1, Kuan-Chou Hou 1, Chih-Wei Chang 1
1
National Chiao-Tung University, Hsinchu City, Taiwan
2
China Medical University, Taichung City, Taiwan
Epilepsy suppression with cooling stimulation is the primary purpose for this study. In this dissertation, cooling stimulation was implemented anddemonstrated on cerebral cortex of rats. Electrodes with needle structure was designed and fabricated by using M EM S technology to minimize the sizeof device. A TE cooler was used to create cooling source and it can be control via electrical current. A cooler component was integrated with an electrodeand a TE cooler, in addition, a thermal sensor was also combined with it to detect temperature variation, which was affected by cooling cerebral cortex.
The cooler components were implanted on surface of cerebral with deep brain stimulation and the thermal sensors were penetrated into cortex to measuretemperature variation which can verify the functions of cooler components. In our experimental results, electrodes with needle structure can improve
efficiency of epilepsy suppression due to the particular structure. Duration, frequency and average single time of epileptic waveforms were used to
identify to performance of suppression.

14:30-15:30 Session: 3E2
Chair&Co-Chair:

Flexible MEMS, Sensors and Printed Electronics 2

Room EIII

Dong Sun & ChengHsin Chuang(3 E2-1) DEV ELOPMENT OF FLEXIB LE NEURAL PROB ES US ING S U-8/PARYLEN E ………………………………No.466
Zhuolin Xiang 1,2, Hao Wang 1,2, Songsong Zhang 1,3, Shih-Cheng Yen 1,2 , M inkyu Je3, Wei Mong Tsang 3, Yong-Ping Xu 1, Nitish V.
Thakor2, Dim-Lee Kwong 3, Chengkuo Lee1,21Department of Electrical & Computer Eng., National University of Singapore, Singapore
2Singapore Institute for Neurotechnology (SINAPSE), National University of Singapore, Singapore
3
Institute of Microelectronics, Agency for Science, Technology and Research (A*STAR), Singapore
A new process for making SU-8 neural probe with fluidic channels and gold electrodes based on multi-layered thin parylene and SU-8 is presented here.
This approach can realize a thin 15 μm gap between electrode surface and neural cells. The thin gap will help to enhance the neural signal acquisition.
Fluidic testing and mechanical testing are conducted to ensure the device reliability.

(3 E2-2) STRETCHING-TUNABLE METAL GRATINGS ON ELASTIC PDMS S UBSTRATE …………………………No.371
Min Ji, Yan Xuan, Changsheng Yuan, Haixiong Ge, Yanfeng Chen
National Laboratory of Solid State Microstructures and Department of Materials Science and Engineering, College of Engineeringand Applied Sciences, Nanjing University, Nanjing 210093, China
Stretching-tunable metal gratings were fabricated on elastic PDM S substrates by nanoimprint lithography combining with a metal transfer method usinga sacrificed patterned layer. Water-soluble polyvinylalcohol (PVA) grating patterns were formed by a bi-layer imprint method. A 50nm thick chromium
film was deposited on the PVA gratings, and then the PDM S substrate was pressed on the metal deposited PVA grating. M etal lines with a period of
550nm and linewidth of 270nm were finally transferred onto the polydimethylsilxane (PDM S) sheets by dissolving the underlying PVA gratings in hot
water with high yield (more than 90%). Optical diffraction tests demonstrated that the period of the metal gratings can be adjusted by stretching the
PDM S sheets parallel and perpendicular to the grating direction. This method may have a potential application for fabrication of a low-cost, large-scale
metal device on flexible substrates.

(3 E2-3) FLEXIB LE PROXIMITY KEY-PANEL ……………………………………………………………………………No.300
Yuh-Chung Hu *, Cheng-Tao Ho 1, Pei-Zen Chang 158

*

Department of Mechanical and Electromechanical Engineering, National ILan University, ILan, Taiwan
Institute of Applied Mechanics, National Taiwan University, Taipei, Taiwan

1This paper proposes a flexible proximity sensor fabricated by resembling print screen. The sensor unit is composed of a polyvinylidene fluoride (PVDF)
layer sandwiched in between top- and bottom-electrode layers which are made of conductive silver ink. The sensing mechanism bases on the
pyroelectricity of the PVDF layer. The aforesaid sandwiched sensor units are sprayed simultaneously on a flexible polyimide (PI) substrate layer by layer
to form a sensor key-panel. The resembling print screen process is very low-cost. The prototype demonstrates that it is sensitive to human fingers, andtherefore one of its applications is becoming for a flexible non-contact proximity key-panel for the user interface of instruments or machines. It may also
be applied to proximity sensing or thermal radiation sensing. The proposed flexible proximity key-panel is also suitable for massive roll-to-roll process.

(3 E2-4) ASSOCIATION OF A LOVE WAVE S ENSOR TO THIN FILM MOLECULARLY IMPRINTED POLYMERS FOR
NUCLEOS IDES ANALOGS DETECTION …………………………………………………………………………………No.280
N. Lebal1, H. Hallil1 , C. Dejous 1, B. Plano 1, A. Krstulja2 , R. Delepée2, D. Rebière1, L. A. Agrofoglio 2
1
Univ. Bordeaux, IMS laboratory, CNRS UMR 5318, Univ. Bordeaux1 IPB, Talence, France
2
Univ. Orleans, ICOA, CNRS UMR 7311, Orleans, France
The overall objective of this work is to develop and validate a quantitative, non-invasive therapeutic tool to detect selected urinary modified nucleosides
as biomarkers of colorectal cancer chemotherapy and to monitor in fine the efficiency of the chemotherapy. Our methodology takes the advantage ofhigh sensitivity of acoustic biosensor combined with high selectivity and robustness of thin molecularly imprinted polymer (M IP) film. In this paper we
present a process based on a thin film of a M IP of adenosine 5’-monophosphate (AMP) coating on the sensor surface which is compatible with theacoustic wave propagation. Detection tests of AMP have been performed in aqueous media. The sensor response was recorded in terms of synchronous
frequency and total insertion losses after both steps: extraction from, rebinding by the M IP layer. A frequency decrease of 6,875 Hz was recorded for
25μg/mL AMP concentration.

(3 E2-5) COALITION TRANSPORTATION OF CELLS WITH OPTICAL TWEEZ ERS ………………………………No.501
Xiangpeng Li, Jianjun Wang, Dong Sun
Dept. of Mechanical and Biomedical Engineering, City University of Hong Kong, Hong Kong
In optical cells manipulation tasks, optical manipulation works only when the cell is located within the optical trap. Currently, due to the lack of control
techniques that automatically control cell transfer while locating the cell within optical trap consistently, cells must be manipulated carefully to avoid
escape from optical trap, which significantly decreases the efficiency of manipulation task. As a result, the development of a control method for rapid
and accurate positioning of cells is becoming a very challenging issue. In this paper, we addressed this challenging problem by developing a uniquevision feedback control method that controls both cell positioning and cell trapping simultaneously. We first establish a new geometric model to confine
the cell within a local region specified near the optical trap and form a Cell-Tweezers Coalition (C-T Coalition) during manipulation. Then, a potential
field function based controller is proposed to drive C-T Coalition to the desired position. Experiments of yeast cell manipulation are performed todemonstrate the effectiveness of the proposed approach.

15:45-17:30
18:00-20:00

Technical Tour
Farewell Party

59

Poster and Exhibition 1 (P1) : Poster Number 1P1-1P100
17:00-19:00
1P1-001

EII

Day1: Monday, April 8, 2013

MEAS UREMENT MET HOD OF LIGHT TRANS MITTANCE OF LAYERED METAL-DIEL ECTRIC METAMATERIAL……………………………………………………………………………………………………………………………………No.141
Akihiro Isozaki, Tetsuo Kan, Kiyoshi Matsumoto and Isao Shimoyama
Department of Mechano-Informatics, The University of Tokyo, Japan
We propose a measurement method of light transmittance of metamaterials by directly contacting the metamaterial on a Si photodiode. Our measurement
method enables direct detection of not only the propagation wave component but also the evanescent wave component through the metamaterial. In thispaper, we fabricated a layered metal-dielectric metamaterial composed of Ag / Al2O3 layers on the Si photodiode. The transmittance property ofevanescent wave was measured. This result indicates that our measurement system detects evanescent wave transferred through the fabricatedmetamaterial.

1P1-002

FOCUS ING REFL ECTOR AND LENS WITH NON-PERIODIC PHAS E-MATCHED S UB WAVELENGT H HIGHCONTRAST GRATING ………………………………………………………………………………………………………No.174
Qinglong Yu 1, Changsheng Zhang 2, Hongbo Zhu 1, Miao Zhang 3, Yongjin Wang 1,3
1
Institute of Communication Technology, Nanjing University of Posts and Telecommunications, China
2
School of Opto-electronic Information Science and Technology, Yantai University, China
3
State Key Laboratory of Functional Materials for In formatics, Shanghai Institute of Microsystem and Information Technology,
Chinese Academy of Sciences, China
In this paper, we propose novel planar subwavelength non-periodic high contrast gratings (HCGs) with excellent focusing abilities due to theirphase-matched structures. Rigorous coupled-wave analysis (RCWA) method and finite-element method (FEM ) are performed to investigate thenon-periodic HCG structures for either focusing reflector or lens at the wavelength of 1.55μm. The structure with focusing ability is optimized tosimultaneously meet the phase-matched conditions of the reflectors and lenses. When the grating bars material is silicon, the HCG serves as focusingreflector, and the HCG with the grating bars of GaN has transmission focusing ability. Both reflector and lens have large numerical aperture (NA), highdiffraction efficiency and excellent focusing ability. These HCG structures are promising for designing and fabricating photonic devices that require
focusing components, especially for silicon and III-nitride integrated photonic devices.

1P1-003

LAS ER-INDUCED THERMOEL ECTRIC VOLTAGE IN La0.8Sr0.2 FeO 3 THIN FILMS ………………………………No.188
Z. Sun, L. S. Zhang, P. J. Wang and Y. Fang
Beijing Key Lab for Nano-Photonics and Nano-Structure, Capital Normal University, Beijing, China
Laser-induced thermoelectric voltage (LITV) effect is observed firstly in La0.8Sr0.2FeO3(LSFO) thin films grown on the vicinal cut LaAlO3 (10°) substrateby pulse laser deposition(PLD). The peak voltage of LITV signals increase linearly with the pulse laser energy. The linear function is
y=0.05131x-0.02084. The coefficient of determination and standard deviation for linear relationship reach 0.99667 and 0.00377 respectively. It shows agood linear relationship between peak voltage and laser energy densit from the above result. It is significant for researching the accuracy and precision ofphotoelectric detector.

1P1-004

FREES TANDING WHISPERING-GALLERY MODE MICRODIS K RESONATOR …………………………………No.211
Zheng Shi1, Shu min He 1, Hongbo Zhu 1, Miao Zhang 2, Yongjin Wang 1,2
1
Institute of Telecommunication and Technology, Nanjing University of Posts and Telecommunications, Nanjing, China
2State Key Laboratory of Functional Materials for In formatics, Shanghai Institute of Microsystem and Information Technology,
Chinese Academy of Sciences, Shanghai, China
This article proposes a high-Q value Whispering-Gallery M ode (WGM) microdisk resonator, which is surrounded by photonic crystal with square lattice.
Finite element method (FEM) is performed to model the microdisk resonator, and an ultrahigh quality factor (Q) value of 1.37×108 can be achieved at the
wavelength of 1435.4nm. The proposed microdisk resonator is realized on a silicon-on-insulator (SOI) substrate. These structures of the device aredefined by electron beam lithography, and then transferred into silicon layer by ion beam etching. The buried oxide layer is removed to generate
freestanding photonic crystal and suspended microdisk.

1P1-005

SILVER NANOPARTICLES AGGREGATE ON PASS IVATED COPPER FOIL FOR S URFACE-ENHANCED RAMAN
SCATTERING …………………………………………………………………………………………………………………No.267
Zuojun Zhang, Li Chen , Gang Chen, Chunhong Lai, Hui Zhou
Defense Key Disciplines Lab of Novel Micro-nano Devices and System Technology, Chongqing University, China
Key Laboratory of Optoelectronic Technology & Systems Ministry of Education, Chongqing University, China
Surface-enhanced Raman scattering (SERS), as a powerful tool of chemical and biological analysis, has been investigated extensively in recent years. In
this work, the reduction of silver nitrate by copper foil in aqueous medium was used to prepare silver nanoparticles and a method of applying ultrasonic60

to passivate the copper foil in the sulfuric acid solution was proposed in order to regulate the deposition of the Ag nanoparticles. Analysis of the surface
structure by a field-emission scanning electron microscope (FESEM ) revealed that the silver nanoparticles deposited on the passivated copper foil weremore regular. SERS spectra of Rhodamine6G (R6G) adsorbed on these Ag-Cu substrates were studied and compared. It’s found that the Ag-Cu substrateprepared with the Cu foil passivated by ultrasonic treatment has a significantly higher Raman signal sensitivity, better large-area uniformity, and 80% of
original sensitivity was remained in 10 days of storage time in the air, indicating the substrates are fairly stable.

1P1-006

OPTIMAL DES IGN OF PERIODIC NANOSTRUCTUR ES FORMED IN SOLAR CELLS AS AN ANTIREFL ECTIVE
LAYER ……………………………………………………………………………………………………………………………No.274
Yating Shi1, Shiyuan Liu 1,2, Jinlong Zhu 1, Chuanwei Zhang 2, Xiuguo Chen 1, Zirong Tang 1
1
Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, China
2State Key Lab of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, China
Recently, periodic nanostructures with a rectangular profile have been widely used in the backside layer of solar cells to reduce the reflectance and toenhance the performance. In this paper, we design solar cells by applying two-dimensional periodic nanostructures with a trapezoidal profile as anantireflective layer. Through intensive simulations using rigorous coupled-wave analysis (RCWA), we attempt to optimize the profile parameters,
including the sidewall angle (SWA), the pitch, and the height. Simulation results indicate that the rectangular profile displays a lower reflectance than the
trapezoidal profile. Moreover, when the pitch is almost double of the width and the height is 1~2 times of the width, the total reflectance is reduced by
25~35%.

1P1-007

INDUC ED-TRANSPARENCY IN S ILICON-ON-INS ULATOR B AS ED NOVEL RESONATOR S YS TEMS …………No.291
Danfeng Cui, Chenyang Xue, Chao Liu, Liping Wei, Yonghua Wang, Jun Liu
Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, Taiyuan
030051, China
Science and Technology on Electronic Test & Measurement Laboratory, Taiyuan 030051, China
In the paper, Coupled-resonator-induced-transparency (CRIT) phenomenon in a novel integrated on-chip optical resonator system is experimentallydemonstrated. The system is composed of a four-ring resonator with 20μm diameter on silicon, whose spectrum has a narrow transparency peak with lowgroup velocity. The CRIT effect is observed in the optical coupledresonator due to the classical destructive interference. This system can be used to study
the slow and fast light experiments because of its simplicity and flexibility. In this work, a CRIT resonance with a quality factor of 7.2×104 isdemonstrated with the same cavity size and the power coupling of the system is 60%, which agree well with the theoretical analysis. The through anddrop transmission spectra of the resonator are coincided well with each other.

1P1-008

ANALYS IS OF S ECOND-ORDER RADIAL MODE DIPS IN RACETRACK OPTICAL RING RESONATOR BAS ED ON
SOI RIB WAVEGUIDE ………………………………………………………………………………………………………No.313
Wei Lip ing 1, Xue Chenyang 1, Zang Junbin 1, Cu i Danfeng 1, Wang Yonghua1, Zhang Wendong 1, 2
1
Science and Technology on Electronic Test & Measurement Laboratory, North University of China, China
2
Key Laboratory of Instrumentation Science & Dynamic Measurement, North University of China, China
In this paper, detailed design and analysis of a polarization mode splitting resonator based on silicon-oninsulator rib waveguide is presented. By
analyzing the mode birefringence in the ultra-small rib waveguide, the directional coupler is introduced to the micro-ring resonator to realize the splittingof the quasi-TE and quasi-TM polarization modes from the same output port in specific wavelength range. It is demonstrated that after splitting thequasi-TM polarization mode, the Q value of the quasi-TE polarization mode is 23000±1000, about twice of that without splitting the quasi-TM
polarization mode. This novel characteristic of race-track ring resonators is quite promising in many applications of optical components, such as theelectro-optical modulators.

1P1-009

AN ELECTROSTATICALLY-DRIVEN AND CAPACITIVELY-S ENS ED DIFFERENTIAL LATERAL RES ONANT
PRESS URE MICROS ENSOR ………………………………………………………………………………………………No.600
Bo Xie1, 2, Hailong Jiao 1, 2, Junbo Wang 1, Deyong Chen 1, and Jian Chen 1
1State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing, China
2
University of Chinese Academy of Sciences, Beijing, China
This paper presents an electrostatically-driven and capacitively-sensed resonant pressure micro sensor. The device was fabricated based on a SOI wafer
requesting only 2 masks and simplified micro-fabrication steps including DRIE, sputter and wet etching. The sensor was quantified by an open loop
system, producing a Q-factor higher than 10430 in vacuum (less than 0.5 Pa). The resonant frequency was shown to change linearly in response to
applied pressure ranging from 50 kPa to 110 kPa. Experimental data analysis confirmed a sensitivity of 214 Hz/Kpa with a linear correlativity of 0.99997.

1P1-010

GRAPHEN E FILMS S YNTHES IZED ON EL ECTROPLATED CU B Y CHEMICAL VAPOR DEPOSITION ………No.126
Wenrong Wang 1, 2, Chen Liang 1, 2, Tie Li1, Heng Yang 1, Na Lu 1 and Yuelin Wang
1
State Key Laboratories of Transducer Technology, Science and Technology on Microsystem Laboratory, Shanghai Institute ofMicrosystem and Information Technology, CAS, Shanghai, China
2
Graduate School of Chinese Academy of Science, Beijing, China
In this paper, electroplated Cu was used as substrate to grow graphene by chemical vapor deposition (CVD) with a mixture gas of methane, hydrogen andargon. The different electroplated Cu gain size after annealing was studied. We present the growth temperature, growth time and methane concentration
are key parameters that affect the structural perfection of graphene.

61

1P1-011

CHARACTERIZATION OF FLUID RES ISTANCE IN NANOSTRUCTUR ED TiO2 (NS T) FILM ……………………No.157
Li Nannan, Chen Jing
National Key Laboratory of Micro/Nano Fabrication Technology, Peking University, Beijing, China
Embedded microchannels are required in many microfluidic devices. However, the channels may reduce the strength of the bulk substrate. In this study,
Nanostructured TiO2(NST) material is proposed to provide the fluid passage for the drug into the required location while still maintains very goodstrength. A simple method was proposed to obtain the pressure drop over NST filled channel and the fluid resistance was experimentally determined. The
Darcy’ equation of NST films was setup, and the permeability was measured 1.475×10-11 m2. With a relatively high fluid resistance, further optimization
should be carried out for NST microfluidic devices.

1P1-012NANOPARTICLES S YNTHES IS AND S ELF-ASSEMB LY BAS ED ON PLAS MA-INDUCED RIPENING OF AG FILM ON
SI S UBSTRATE …………………………………………………………………………………………………………………No.217
Jun Liu, Huafei Wen, Yunbo Shi, Chao Zhai, Jun Tang, Binzhen Zhang, Chenyang Xue, Wendong Zhang
Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Shanxi, China
A simple and low cost nanoparticle synthesis and self-assembly process based on the plasma induced ripening of Ag films is demonstrated. Ag films aredeposited on p-doped Si substrates using a DC magnetron sputtering. With the assistance of O 2/Ar plasma treatment, different sizes and densities of Ag
nanoparticles are formed. The morphology of the samples is characterized by scanning electron microscopy. A clear decrease in the mean particle size
and an increase in particle density are observed with increasing plasma power. M eanwhile, treatment time and plasma composition could be other two
parameters which can affect the nanoparticles assembly process. SERS and PL enhancement of Ag nanoparticles is studied. From the experimental
results, it provides a controllable method of changing the nanoparticle distribution on substrates, which has potential applications in the fields of solar
cells, biosensors, and catalysis.

1P1-013FABRICATION OF HYDROPHOB IC S URFACES WITH FLUORINATED ACRYLIC RES IN AND AMIDOGEN
MODIFIED S ILICA NANOPARTICLES ……………………………………………………………………………………No.228
D.Y. Tang, Y.D. Guo, F. Yang
Department of Chemistry, Harbin Institute of Technology, China
This study focus on the modification of nano silica by silane coupling agent of KH550 at optimal production parameters. The effects of KH550 under
different pretreatment conditions, the amounts of KH550 added on the properties of nano silica were investigated by FTIR and TG-DTA detections. Thenthe nano silica and fluorinated resin composites were prepared and the preferable reactive conditions were determined. The properties of the dielectricloss (tanδ) were investigated by the electric capacitance. The transparency and hydrophobic abilities were investigated by UV-Vis spectroscopy and static
contact angle values.

1P1-014DEVELOPMENT OF CLUS TER ION SOURCE B AS ED ON MODULATED PULS E POWER MAGNETRONSPUTTERING TECHNIQUE …………………………………………………………………………………………………No.239
1,2

1,2

2

2

2

C. H. Zhang , H. Tsunoyama , H. Akatsuka , H. Sekiya , T. Nagase , A. Nakajima1,2
1

JST ERATO, Nakajima Designer Nanocluster Assembly Project, Kawasaki, Japan2
Department of Chemistry, Faculty of Science and Technology, Keio University, Yokohama, JapanA new ion source based on modulated pulse power (MPP) magnetron sputtering (M SP) was developed and demonstrated for cluster production. By
employing M PP-M SP, both silver and silicon cluster beams were produced and analyzed by a quadrupole mass spectrometer. It is found that the
maximum intensity of silver cluster anions reaches 500 pA, which is considerably higher than that with a conventional DC-M SP. For silicon cluster
cation, the overall ion intensity of the cluster beam by MPP-M SP is about three times higher than that generated by DC-MSP.

1P1-015

WATER SPLITTING EFFECT ON PHOTOANODE MADE OF ZINC OXIDE NANORODS COATED WITH TUNGS TENTRIOXIDE NANOPARTICLES ………………………………………………………………………………………………No.247
Yuefan Wei1, Hejun Du 1, Junhua Kong 2, Xuehong Lu 2, Lin Ke 3, Xiaowei Sun 4
1
School of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore
2School of Materials Science and Engineering, Nanyang Technological University, Singapore
3
Institute of Materials Research and Engineering, Singapore
4School of Electric and Electronic Engineering, Nanyang Technological University, Singapore
The combination of semiconductor metal oxides with different band gaps is an effective strategy to widen the light absorption spectrum. In this work,
zinc oxide (ZnO) nanorods coated with tungsten trioxide (WO3) nanoparticles were successfully synthesized via hydrothermal method followed bydeposition from aqueous suspensions. ZnO/WO3 nanorods were observed to be densely and uniformly packed with high aspect ratio. This is consistent
with the X-ray diffraction (XRD) analysis. Photoluminescence (PL) spectrum reveals that the as-synthesized ZnO/WO3 nanorods exhibit stronger
emission centered at around 600nm, compared with pristine ZnO nanorods. Light absorption spectrum presents higher absorption over wider wavelength
range. Photoelectrochemical (PEC) properties were investigated in a standard three-electrode system. The prepared ZnO/WO3 nanorods show increment(45%) in photocurrent density and improvement (20%) in maximum photocurrent conversion efficiency (PCE). These enhancements are mainly
attributed to the extension of the light absorption and improved charge transport of WO3 nanoparticles integrated ZnO nanorods.

1P1-016

SYNTHES IS OF S UPERPARAMAGETIC IRON OXIDE NANOPARTICLES IN CARBON REDUCTION
MET HOD …………………………………………………………………………………………………………………………No.292
Zhang Qiang, Xue Chenyang, Li Junyang, Chou Xiujian, Gao Libo, Hai Zhenyin

62

National Key Laboratory for Electronic Measurement Technology, North University of China, China.
The current paper presents our new approach in synthesizing superparamagetic iron oxide nanoparticles. The Fe3O4 nanoparticles (~500nm) are
synthsized through carbon reduction method, which is a brand new method. The best parameters of this method are fixed through characterizing
transmission electron microscope (TEM ), X-Ray Diffraction (XRD) and Vibrating Sample M agnetometer (VSM ) of the Fe3O4 nanoparticles synthsizedunder different experimental conditions. The TEM characterization results show that the best ratio of the carbon and ferric chloride is 3:1 and the mostsuitable calcining time is 3 hours. The nanoparticles, which were obtained with furnace cooling under vacuum condition after 3 hours calcining, have thebest magnetic properties and most stable crystal from. Moreover, the quantitative analysis of this new method is taken to confirm the repeatability of thismethod. The actual qualities of the Fe3O4 nanoparticles are always consistent with the theoretical one, which indicates that the repeatability of thismethod is excellent.

1P1-017

NEW CONSTANT C TO CHARACTERIZE S TRUCTURE DISORDER OF POLYS ILICON THIN FILMS GROWN B Y
DIFFERENT PROCESS ING FOR MEMS DEVICE APPLICATIONS ……………………………………………………No.303
Quan Wang 1, 2, Ran Hu 1
1
School of mechanical engineering, Jiangsu University, Zhenjiang 212013, China
2State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzho ，China
The topic category of this paper is Nanomaterials. The structure information of LPCVD polysilicon (p-Si) films have been studied by XRD, SEM andTEM [1]. The structural depth profiles of p-Si films have been obtained by Raman spectroscopy at different excitation wavelengths and by a higher
spatial resolution approach using microline focus Raman spectroscopy [2]. Flat, low-stress (LS), boron-doped (B-doped) p-Si films were prepared on
crystalline silicon substrates by LPCVD. They are characterized by XPS, XRD and Raman, respectively. The work in this paper focuses on disorderdegree, characterized by a new constant C. The disorder state of p-Si films can be determined by the constant C.

1P1-018

LOW TEMPERATUR E CASTING OF GRAPHENE INTO VARIOUS 3-D S HAPES ……………………………………No.348
Shu Wan, Hengchang Bi, Kuibo Yin, Xiao Xie, Yilong Zhou, Neng Wan, Feng Xu, Litao Sun
SEU-FEI Nano-Pico Center, Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing, China
Here we report a pH-mediated hydrothermal reduction method that combined with moulding methods, realizing fabrication of ultrahigh density grapheme
macrostructures with various shapes. This ‘compact graphene’ (CG) has a compressive strength of 361 MPa (6 times higher than conventional graphite
products) and an excellent electrical conductivity. The processing steps are scalable and may contribute to new products. CG structures may be an ideal
irradiation protection material for aerospace, atomic energy, and nuclear science due to its high density.

1P1-019

EFFECT OF RF SPUTTERING PARAMET ERS ON PZT CRYS TAL GROWTH ………………………………………No.378
Miao Yu 1, Tim Giffney 2, Kean AW 2, Haixia Zhang 1
1
Institute of Microelectronics, Peking University, China
2
University of Auckland, New Zealand
Lead zirconate titanate(PZT) due to its large polarization, large dielectric constant and good piezoelectric performance has become popular in a wide
range of applications in M EM S field. The prevailing technique for PZT deposition is sol-gel method, but the stability of solution and repeated coating
can’t be precisely controlled. Sputtering technique is used in this work for its relatively simple fabrication process, uniform thickness. In this work, PZT
films are sputtered on Pt/Ti/SiO2/Si substrate prior to annealing. PZT preferential orientation is highly depend on the sputtering parameters. X-ray
diffraction(XRD) analysis has been performed to compare the crystal growth. TiO2 seed layer is also introduced in this work.

1P1-020

FIRST-PRINCIPLES STUDY ON THE EL ECTRO-MECHANICAL COUPLING OF THE Si/ Ge CORE-S HELLNANOWIRES …………………………………………………………………………………………………………………No.382
Lei Li, ShuangYing Lei, Ruo Yu Wang, Hong Yu, QingAn Huang
Key Laboratory of MEMS of Ministry of Education, Southeast University, China
We have simulated the piezoresistance coefficients (Pie coefficients) in Si/Ge core-shell nanowires with a certain diameter and different thickness
Ge-shell in the longitudinal direction on the basis of First-Principles calculations of models. Through calculations, it was found that the Pie coefficients of
the nanowire constructed with an axis of Si atoms and three layers of Ge atoms outside (Si1Ge3 in Figure1) almost kept consistent with the GeNW as
negative values. Under the compressive condition, the Pie coefficient of the Si2Ge2 can reach up to-21.20×10-11Pa-1 . However, when the Ge-shell was
decreased to only one Ge-atom layer, the Pie coefficients varied from negative values to positive ones. We also obtained the pie coefficients of the SiNW:
9.46×10-11Pa-1 and 35.77×10-11Pa-1 respectively under compression and tension.

1P1-021ANALYS IS OF WATER SORPTION IN S ULFONATED POLYIMIDE MEMBRANES- EFFECT OF THE MEMBRANE
NANOS TRUCTURE ……………………………………………………………………………………………………………No.601
Yongli Li, Quang Trong Nguyen, Camille Lixon Buquet and Stephane Marais
PBS Laboratory, UMR 6270 CNRS, FR 3038, Université de Rouen, De Broglie Bld, 76821 Mont Saint Aignan Cedex, France.
Water sorption in sulfonic polyimides with or without ionic block structure was analysed with Feng's new dual mode model. The model parameters Cp
and A’ correspond to the sorbed water molecules on the first layer close to the ionic groups and on the subsequent layers, respectively. From these fitted
physical parameters, the water sorption on membranes with different counter ions was studied and the hydration energy and size of counter ions wereproved to have much influence on the Cp values. The impact of the nano / microstructure of the copolymers on the Cp / A’ values and on the water
sorption isotherms was discussed and compared with that for the well-known Nafion® membranes.

63

1P1-022

GRAPHEN E AS DRY ADHES IVE INTERACTING WITH S EMICONDUCTOR S UBSTRATES ……………………No.412
Jun Sun, Tao Xu, Feng Xu, Xiao Xie, Litao Sun
SEU-FEI Nano-Pico Center, Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing, China
Here we show by molecular dynamics that graphene could be utilized as dry adhesive interacting with semiconductor substrates. Various potential
semiconductor substrates are introduced and present similar results. This work opens up a new prospect for the applications of graphene and would bevaluable for the scientific studies of adhesion at nanoscale.

1P1-023

3D VIS UALIZATION OF THE MICROSCOPIC CHARACTERIS TIC IN MAGNETORHEOLOGICALFLUIDS …No.448
Yan Yang, Jin Huang
Key Lab. of Manufacture and Test Techniques for Automobile Parts, Ministry of Education, Chongqing Univ. of Technology, China
The 3D microstructure and the rheology of Magnetorheological (M R) fluids are investigated using digital micro holography. A digital micro holographic
system which can measures the rheological mechanism of M R fluids is presented. To accurately locate the focal plane of the particles in MR Fluids indigital holography, the overall-sharpness method is introduced which can effectively eliminate the noise on the focal plane determination. The
two-threshold and image segmentation methods were used to obtain high quality binary images from which we can get satisfied measurement results ofparticle size and chain structure. The size distributions and the 3D visualization of microscopic characteristic of MR fluids are effectively measured. The
experiment results show the digital holography is a well tool for measurement of the behaviors of MR fluids.

1P1-024

EFFECTS OF THREE PARAMETERS ON GRAPHEN E S YNTHES IS B Y CHEMICAL VAPOR DEPOSITION ……No.449
Ajjiporn Dathbun, Sutichai chaisitsak
Department of Electronics Engineering, Engineering, King Mongkut's Institute of Technology Ladkrabang, Bangkok, 10520 Thailand.
A high quality graphene film on a copper foil was successfully grown by a CVD process using ethanol as a carbon source. The effect of growthtemperatures (650-850°C), reaction times (5-50 min) and post-CVD cooling process rates (slow-cooling, fast-cooling and fast-cooling under ethanol
exposure) on the formation of graphenes was investigated by Raman spectroscopy and scanning electron microscopy (SEM ). The graphene film
deposited under the optimal conditions showed features of a high quality such as a high I2D/IG ratio of ~8, a low ID/IG ratio of 0.28 and a narrow full
width half maximum (FWHM) of Lorentzian-shaped 2D peak of ~35 cm-1. It was found that the quality of graphene film could be enhanced by
optimizing the growth temperature and time, while the number of graphene layer was less sensitive to the cooling rate. However, the fast cooling process
under ethanol exposure was found to be a key process for obtaining graphenes with a large domain size. These findings may help to fabricate high-quality
graphenes on a copper foil for electronic applications.

1P1-025

SOFT MAGNETIC PROPERTIES OF Ni81 Fe1 9 FILM WITH DIFFER ENT S UBSTRATES US ED FOR
MICRO-FLUXGATE ……………………………………………………………………………………………………………No.451
Yang Shanglin, Liu Shibin, Guo Bo, Feng Wenguang, Hou Xiaowei
School of Electronics and Information, Northwest Polytechnical University, China
The soft magnetic properties of Ni81Fe19 films respectively with Ti, Ta and Cr substrates used for micro-fluxgate have been studied in this paper. The
films were characterized using transmission electron microscope (TEM ), X-ray diffraction (XRD) and vibrating sample magnetometer (VSM ). The
testing results showed that Ta substrate film, due to its ladder rising hysteresis loop, is more appropriate for fluxgate core in these four kinds of Ni81Fe19
films, film with no substrate and film with Ti substrate take the second place and the Cr substrate film would not be suitable as fluxgate core because ofits bad soft magnetic properties.

1P1-026

FABRICATION OF COPPER NANOWIRES B Y EL ECTRODEPOS ITION US ING ANODIC ALUMINUM OXIDETEMPLATE ………………………………………………………………………………………………………………………No.465
C.K. Chung 1,2, C.Y. Yang 2, M .W. Liao 1, and S.L. Li1
1
Dep’t of Mechanical Engineering, National Cheng Kung University, Tainan, Taiwan
2
Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan, Taiwan
In this paper, effects of potential and output mode on copper nanowire arrays via porous anodic aluminum oxide template by electrochemical deposition
method have been investigated. The copper nanowire arrays were fabricated using electrochemical deposition in 0.2 M CuSO4 by different potential
modes including direct current (DC) and pulse. The nanostructure, morphology, chemical composition and phase of copper nanowire arrays were
examined by scanning electron microscopy and grazing incidence X-ray diffraction. The results indicated that the copper nanowire arrays deposited bypulse mode revealed high aspect ratio despite high potential while that at higher DC potential was rather short due to the hydrogen generation in
reduction reaction. The short duty cycle of 50% in pulse deposition can release the produced hydrogen for good nanowires formation.

1P1-027

MECHANICAL DURAB ILITY OF MICRO-NANO STRUCTURES S URFACE OF B LACK S ILICON PRODUCED B Y
FEMTOS ECOND LAS ER ………………………………………………………………………………………………………No.526
X.B.Guo 1 , J.N.Ding 1,2, S.Y.Wang 1, J.H.Qiu 1,2 , B.Kan 1,2, N.Y.Yuan 1,2
1
Center for low-dimensional materials, micro-nano devices and system, Changzhou University, Changzhou, China
2
Jiangsu Key Laboratory for Solar Cell Materials and Technolgy, Changzhou, China
Hierarchical micro-nano structure surface on silicon is directly produced by femtosecond laser in air. The laser processing reduces the reflectance ofsilicon significantly in the studied wavelength range. M echanical durability of the micro-nano structure surface has been studied. It is indicated that wear
is significantly reduced under water saturation lubrication. Moreover surface modification with Perfluoropolyether improves its mechanical durability.

641P1-028

MECHANICAL PROPERTY OF NANOSCALE ZnO/Al 2O3 MULTILAYERS: AN INVES TIGATION B Y
NANO-INDENTATION …………………………………………………………………………………………………………No.527
X.Q.Wang 1,2, J.N.Ding 1,2,3, N.Y.Yuan 2,3 , G.G. Cheng 1, Y.Y.Zhu 2,3, B. Kan 2,3
1
Center for Micro/Nano Science and Technology, Jiangsu University, Zhenjiang, China
2Center for low-dimensional materials, micro-nano devices and system, Changzhou University, Changzhou, China
3
Jiangsu Key Laboratory for Solar Cell Materials and Technology, Changzhou, China
Nanoscale ZnO/Al2O3 multilayers were prepared on Silicon substrates by atomic layer deposition (ALD) method at 200°C. To understand the size effectof ZnO nanoscale layers on hardness, the mechanical properties of the ZnO/ Al2O3 multilayers were investigated using nano-indentation technique. As
the bilayer period decreases from 60 to 2 nm, the micro-structures of ZnO layers changed from polycrystalline to amorphous. In the bilayer periodinterval of 60 to 6 nm, the variation of hardness versus bilayer period is similar to Hall-Patch relation, with maximum hardness and elastic modulus of~10.69GPa and ~138.1GPa, respectively. However when the bilayer period is smaller than 6 nm, the nanolaminates became softer than the single ZnO
film.

1P1-029

SYNTHES IS OF ANTIB ACTERIAL TiO 2/PLGA COMPOS ITE B IOFILMS ………………………………………………No.121
Jau-Yi Wu 1, Ching-Wen Li2 , Ching-Hsiu Tsai3, and Gou-Jen Wang 1,2
1
Graduate Institute of Biomedical Engineering, National Chung-Hsing University, Taichung, Taiwan
2
Ph.D. Program in Tissue Engineering and Regenerative Medicine, National Chung-Hsing University, Taichung, Taiwan
3
Graduate Institute of Biotechnology, National Chung Hsing University, Taichung, Taiwan
The main purpose of this study was to develop a TiO2/PLGA composite biomaterial for artificial dressing applications. E. coli and S. aureus were used as
biological indicators for the disinfection efficiency of the proposed TiO2/PLGA composite. Various concentration ratios of TiO2 verse PLGA were
implemented to optimize the disinfection efficiency of the composite biomaterial. Cell seedings of BECs and L929s on the TiO2/PLGA composite
biomaterial are further conducted to evaluate the feasibility of the TiO2/PLGA composite biomaterial on wound healing applications. Experimental
results illustrated that TiO2/PLGA composite biofilms containing 10% of TiO2 nanoparticles revealed an effective antibacterial property but kept acomparatively low suppression on cell growth.

1P1-030

QUANTITATIVE CHARACTERIZATION OF SPECIFIC TARGETING OF TUMOR CELLS B Y
ANTIB ODY-FUNCTIONALIZED PARTICLES ……………………………………………………………………………No.480
M.T. Stamm1, A.S. Trickey-Glassman 1, L. Jiang 1,2, Y. Zohar1,3
1
Department of Aerospace and Mechanical Engineering,2College of Optical Sciences3
Department of Biomedical Engineering, University of Arizona, USA
Receptor-ligand binding has been one of the more popular approaches to specifically targeting tumor cells. In this work, targeting efficiency wasquantitatively characterized using silica particles functionalized with EpCAM antibodies and EpCAM-expressing BT-20 breast cancer cells. The effects
of incubation time and particle concentration on the number of functionalized particles bound to target cells were experimentally investigated. The
number of bound particles was found to increase with particle concentration, but not necessarily with incubation time. While particle desorption andcellular loss of binding affinity in time seem to be negligible, cell-particle-cell interaction was identified as the limiting mechanism for the number ofparticles bound to target cells. The current findings suggest that separation of a bound particle from a cell may be detrimental to cellular binding affinity.

1P1-031

NUMERICAL S IMULATION ON PATTERN FORMATION B Y VASCULAR MES ENCHYMAL CELLS BAS ED ON THE
EXOGENOUS SOURCE OF ACTIVATOR …………………………………………………………………………………No.284
Hongwei Liu, Xin Zhao
Institute of Robotics Automatic Information System, NanKai University, Tianjin, China
This paper mainly explores the Turing patterns and pattern transferring of the vascular mesenchymal cells by external addition of activator. First, we
perform a one-dimensional analysis to obtain the Turing space of the exogenous source of activator, and then explore the various Turing patterns withvarying the ratio of the diffusion coefficients of activator and inhibitor, because of the essence of Turing bifurcation. Simulation results show that theTuring patterns range from spots to stripes, next labyrinths and finally holes with increasing the ratio or the dosage of the exogenous source of activator,
or in other words, from dense to sparse. Furthermore, we explore the patterns transferring in the bistability system, and obtain the secondary patterns of
the diverse patterns by altering the external addition of activator and various secondary patterns can be transferred from an initial pattern.

1P1-032

IMPROVEMENT OF DNA ORIGAMI’S ADSORPTION ON S ILICON S UBSTRATE …………………………………No.335
Pengfei Dai1 , Honglu Zhang 2, Tie Li1 , Yuelin Wang 1, Jie Chao 2, Chunhai Fan 2
1
State Key Laboratories of Transducer Technology and Science and Technology on Micro-system Laboratory, Shanghai Instituteof Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China
2
Laboratory of Physical Biology, Shanghai Institute of Applied Physics, Chinese Academy of Sciences, Shanghai, China
DNA origami, in which a long single strand of DNA is folded into a shape using shorter ‘staple Strands’, promises low-cost ways to create nanoscale
shapes and can even display patterns of binding sites of 6-nm-resolution, in principle allowing complex arrangements of carbon nanotubes, silicon
nanowires, or quantum dots [1]. However, adsorption of origami appears better results on mica substrate, which cannot compatible with thecomplementary metal oxide semiconductor (CMOS) process. Here we describe a method to improve the adsorption of origami on silicon substrate, by
quantitative control of the adsorption conditions, which will hopefully make contributions for churning out nanoscale shapes with CMOS process in the
future.

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1P1-033

THE PHOTODIODES B AS ED ON THIN FILM ORGANIC EL ECTRONIC DEVICE …………………………………No.464
Jen-Wei Huang, Tsung-Sheng Sheu, Jin-Cherng Shyu
Department of Physics, R.O.C. Military Academy, Taiwan
In this study, we propose the detection of the black shutter using thin film organic photodiodes. The device structure include hole transporting layer,
polyethylenedioxythiophene: Poly-styrenesulphonate (PEDOT:PSS), active layer, poly(3-hexylthiophene): [6,6]-phenyl-C61-butyric acid methyl ester(P3HT:PCBM), indium tin oxide anode (ITO), and Al or LiF/Al cathode. The optimal opto-electronics effect of device structure was it had 150℃
heating process, active layer had 105 nm thicknesses and had LiF/Al cathode. The output voltage test used 1000W simulator and 20W fluorescent light,
we got the 0.5V and 0.25V difference, respectively. Output voltage difference is 10 times more than the dye-sensitized photovoltaic cell [1]. Obviously,
thin film organic photodiodes can be expected applications in the wearable eye-gaze tracking systems. It is expectation to measure the signs of thin film
organic photodiodes array and make the relative devices or systems in future.

1P1-034

US E OF CELL MORPHOLOGY AS AN EARLY B IO-S ENSOR FOR VIRAL INFECTION ……………………………No.505
Xianting Ding 1, Ning xia Liu 2, Kyle Matsuo 3, Mingzhu Sun 2, Chih -Ming Ho 1 , Xin Zhao 2
1
Mechanical and Aerospace Engineering Department, University of California, Los Angeles, California, USA
2
Institute of Robotics & Automatic Information System, Nankai University, Tianjin, China
3
Bioengineering Department, School of Engineering and Applied Science, University of California, Los Angeles, California, USA
This paper reports a correlation between cellular morphology and the ability of adapting Vesicular stomatitis virus (VSV) infection. A time-lapse
approach was employed to track the individual difference between homologous cells in adopting viral infection. Our single-cell analysis indicates thatupon viral infection, mature cells that are in spindle shape are less likely to be infected after 24 hour infection. On the other hand, cells undergoingproliferation, which are in rounder shape, tend to adopt much higher viral infection within the same amount of time. This fact suggests cellularmorphology may to be an early bio-sensor for viral infection. The findings in this paper could potentially be applied to other viral infection models.

1P1-035

NANOFLUIDIC S ERS TOWARDS DNA S EQUENCING …………………………………………………………………No.531
C. Chen 1,2, Y. Li1,3 , S. Kerman 1,2 , P. Neutens 1,2, G. Maes 4, L. Lagae1,2, T. Stakenborg 1, P. Van Dorpe1,21
imec, Leuven, Belgium
2
Department of Physics and Astronomy, KU Leuven, Leuven, Belgium
3
Department of Electrical Engineering, KU Leuven, Leuven, Belgium
4Department of Chemistry, K U Leuven, Leuven, Belgium
Surface Enhanced Raman Scattering (SERS), that occurs by exciting plasmon resonances in metal structures, provides high-sensitivity detection withdetailed molecular information. Here we describe the combination of SERS and nanofluidics for the molecular characterization of DNA molecules inside
a nanoslit across a thin, metal coated membrane. The presence of the nanoslit results in mechanical confinement for molecules passing through the slit
and in a strong field confinement upon light excitation, required for SERS. Using electrophoresis to actuate the analytes across the nanoslits, we wereable to record SERS spectra of adenine, a DNA base. Similarly, short DNA oligonucleotides were also successfully detected. It is expected that thenanoslit-based fluidic SERS will become a promising real-time detection tool, even for DNA sequencing.

1P1-036

THEORETICAL INVES TIGATION OF QUAS IPARTICLE B AND STRUCTURES AND OPTICAL SPECTRA OF
LARGE-DIAMET ER S EMICONDUCTING S INGLE-WALLED CARBON NANOTUB ES ……………………………No.111
Y. Y. Xia1,3 , J. L. Mu 2, X. Leng 2, Y. C. Ma2 , M. W. Zhao 3, X. D. Liu 3, J. X. Fang 1
1
Advanced Research Center for Optics, Shandong University, Jinan, China
2
School of Chemistry and Chemical Engineering, Shandong University, Jinan, China
3
School of Physics and State Key Laboratory of Crystal Materials, Shandong University, Jinan, China
Using ab initio many-body perturbation theory (within GW approximation and Bethe-Salpeter equation), including electronic exchange, correlation, andelectron-hole interaction effects, we study the optical properties of largediameter semiconducting single-walled carbon nanotubes (SWCNTs). The
calculated energies of the lowest two optically allowed transitions (E11 and E22) agree well with those deduced from experiments. The lowest opticalallowed transition of these tubes is between the first two van Hove singularities on each side of the Fermi level, which is different from that ofsmall-diameter tubes. The exciton binding energy for E11 is calculated, which is consistent with that of the experiments.

1P1-037

IMPLANTABLE CNT-B AS ED S ENSOR FOR CHONDROITIN S ULFATE PROTEOGLYCANS DET ECTION OF GLIALSCAR AFTER SPINAL CORD INJ URY ……………………………………………………………………………………No.513
Jinwoo Jeong 1,2, Seh wan Kim1 , Jinseok Kim2 , Kukjin Chun 1
1Department of Electrical Engineering and Computer Science, Seoul National University, Seoul, Korea
2Center for Bionics, Korea Institute of Science and Technology, Seoul, Korea
The implantable CNT-based sensor is suggested to detect CSPGs which is main compositions of glial scar which inhibit the axonal regeneration after
spinal cord injury. The suggested sensor is fabricated using spin-coated polyimide and patterned by M EM S process. M ultiwalled CNT networks areformed by air spray method on the interdigitated sensor electrodes as the sensing element of CSPGs. The feasibility of the fabricated sensor is
successfully confirmed in vitro by measuring the resistance change of CNT networks versus various CSPGs concentrations. The results show that thesuggested sensor accurately detects the low CSPGs concentration to sense the regeneration-inhibitory effect of CSPGs.

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1P1-038

CARBON NANOTUB E BAS ED HEAT-S INK FOR SOLID STATE LIGHTING ………………………………………No.525
F. Santagata, G. Almanno, S. Vo llebregt, C. Silvestri, G.Q. Zhang, P.M. Sarro
Laboratory of Electronic Components, Technology & Materials (ECTM), DIMES, Delft University of Technology, P.O. Box 5053,
Feldmannweg 17, 2600 GB Delft, The Netherlands.
A new carbon-nanotube-based (CNTs) heat sink is developed. Due to their high thermal conductivity and aspect ratio, CNT boundles are used as fins of
the heat sink. Fins as high as 300 μm with an aspect ratio of 30 are fabricated. For the thermal characterization of the heat sink, a microheater is
integrated with the heat-sink and it is also used as temperature sensor. It is realized by using the low doped silicon bulk as electrical resistor. The sensor
shows a sensitivity of 0.6 Ω/K. A thermal characterization is performed to evaluate the heat dissipated by the CNT-based heat-sink. Results show that up
to 18% of power reduction can be achieved with the proposed CNTs-based heat-sink configuration.

1P1-039

MICROFLUIDIC DEVICE FOR S UPER-FAST EVALUATION OF MEMBRANE PROTEIN
CRYS TALLIZATION………………………………………………………………………………………………………… No.118
Hsin-Jui Wu 1, Tamara Basta1, Mary Morphew1 , D. C. Rees 2, Michael H. B. Stowell1 , and Y. C. Lee1
1
Univeristy of Colorado, Boulder, Colorado, USA
2
California Institute of Technology, Pasadena, California, USA
M embrane proteins embedded in bi-layer lipids of cell membrane have unique functions including inter-cell communication, ions/molecules transport.
And there is more than 50% of drug design emphasizes on membrane proteins specifically studying on their structure and formation. Recently wereported the structural and functional studies of membrane protein lipid nanoparticles in native biological membrane. This virus-like nanoparticle formed
by a self-assembly crystallization process of membrane protein and lipids is critical to pharmaceutical industrial. These nanoparticles have a variety ofpotential applications in drug delivery and drug design that can carry specific the membrane protein on aim or release control. The previous studies stayon an inefficient method with a standard dialysis process that has low-throughput, time consumption, and protein sample waste. However, theinterdisciplinary cooperation between in biology and M icro electro mechanical systems (M EM S) has been tremendous developed such as Bio-MEM S
and Lab-on-a-chip technologies. Here we demonstrate a new concept with a high-throughput membraneless microfluidic device to fast produce thereconstitution of membrane protein nanoparticles. The reconstitution process in continuous micro flow dominated by convection-diffusion phenomena in
microfluidic channel can be completed in seconds to form protein/lipid particles under multiple conditions applied. The controllable syringe pumps isused to test a combination of conditions rather than using inefficient hand pipette. Moreover this novel microfluidic device can save protein sample
consumption down to only nanoliter or picoliter. By using this device, we have an ability to rapidly form uniform membrane protein lipid nanoparticles
and we believe this new method will make a transformative impact to commercial applications in variety of areas from biology to pharmacology.

1P1-040

Integrated Lenses in Polystyrene Microflui dic Devices ………………………………………………………………………No.125
Yiq iang Fan, Huawei Li and Ian G. Foulds
Electromechanical Microsystems & Polymer Integration Research (EMPIRe) GroupKing Abdullah University of Science and Technology (KAUST), Saudi Arabia
This paper reports a new method for integrating microlenses into microfluidic devices for improved observation. Two demonstration microfluidic devices
were provided which were fabricated using this new technique. The integrated microlenses were fabricated using a free-surface thermocompression
molding method on a polystyrene (PS) sheet which was then bonded on top of microfluidic channels as a cover plate, with the convex microlenses
providing a magnified image of the channel for the easier observation of the flow in the microchannels. This approach for fabricating the integrated
microlens in microfluidic devices is rapid, low cost and without the requirement of cleanroom facilities.

1P1-041

STUDY ON TRAPPING TWO PARTICLES WITH DIEL ECTROPHORETIC MICROFLUIDIC CHIP ……………No.134
Li-guo Chen 1, Hai-hang Cu i 2 , Shao-qian Li 3
1
Robotics and Microsystem Center, Soochow University, Suzhou, China
2
School of Environment and Municipal Engineering, Xi'an University of Architecture and Technology, Xi’an, China
3
Department of Navigation Technology, Shanghai Engineering Center for Microsatellites, Shanghai, China
In microfluidic field, how to capture, manipulate and separate micro-particles suspended in liquid media has very important applications. Up to now, only
seldom works focused on how to trap two particles with different sizes. In order to achieve this goal, a dielectrophoretic microfluidic chip was designed.
The shape of electrode and flow channel was optimized; the electric field and the flow field were simulated. At last, the chip was fabricated to verify thedesign. The results show that the chip is able to realize the function of pairing two particles with different sizes.

1P1-042

LOW-COST RAPID PROTOTYPING OF FLEXIB LE PLASTIC PAPER B AS ED MICROFLUIDIC DEVICES ……No.150
Yiq iang Fan, Huawei Li, Ying Yi and Ian G. Fou lds
Electromechanical Microsystems & Polymer Integration Research (EMPIRe) GroupKing Abdullah University of Science and Technology (KAUST), Saudi Arabia
This research presents a novel rapid prototyping method for paper-based flexible microfluidic devices. The microchannels were fabricated using laser
ablation on a piece of plastic paper (permanent paper), the dimensions of the microchannels was carefully studied for various laser powers and scanningspeeds. After laser ablation of the microchannels on the plastic paper, a transparent poly (methyl methacrylate)(PMMA) film was thermally bonded to theplastic paper to enclose the channels. After connection of tubing, the device was ready to use. An example microfluidic device (droplet generator) was
also fabricated using this technique. Due to the flexibility of the fabricated device, this technique can be used to fabricate 3D microfluidic devices. The
fabrication process was simple and rapid without any requirement of cleanroom facilities.

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1P1-043

SYNTHES IS OF SCALAB LE MICRODROPLETS WITH FLUID INS TAB ILITY OF S HEARING FLOW IN
MICROFLUIDICS ……………………………………………………………………………………………………………No.164
Xianting Ding 2, Jian Yang 1 , Zh ijun Ma3, Dandan Liu 1 , Weiping Wang 1, Jianjun Ye1 , Ieong Wong 2, Matt Barnes 2
1
Institute of Process Equipment, Zhejiang University, China
2
Department of Mechanical and Aerospace Engineering, University of California, USA
3
Department of Material Engineering, South China University of Technology, China
This paper reports a microfluidic reactor for synthesizing micro- and nano-droplets using fluid shearing instability of immiscible flow in mircochannels.
Three factors, flow rate between the two inputs, spout geometry and surface tension are numerically studied. Based on the simulation, a device with the
optimal parameters was fabricated and tested. Both computational fluid dynamics (CFD) simulation results and experimental results suggested that thistechnique is capable of conveniently controlling the droplets sizes from hundreds of micrometers down to several micrometers or even nanometers. Thispilot research offers a proof of concept demonstration using instabilities in the microchannels to synthesize large quantity of microdroplets. Although themicrodroplets in this study were formed by DI water containing Tween20 and silicon oil, the design with modification could be applied for synthesis ofother types of micro- and nano-droplets.

1P1-044

STUDY OF POLYMERIC MEMS MICRO-PUMP ACTUATED B Y PZT B IMORPH …………………………………No.166
Yi Luo 1, Xianglong Yin 1, Xiaodong Wang 1 Zongbo Zhang 2
1
Key Laboratory for Micro/Nano Technology and System of Liaoning Province,Dalian University of Technology, Dalian, China
2
College of Mechanical and Electronic Engineering,China University of Petroleum, Qingdao, China
Check valve micro-pump is easy to reach high flow rate and has a promising application prospect in micro fluidic devices and artificial organs. There areseveral vibration elements in check valve pump, including actuator, membrane and valves. The vibration performances of these elements have a coupling
influence on the performance of micro-pump. In this paper, the comprehensive analysis was carried out using finite element model. Four kinds ofmicro-pumps with different valves and actuators were designed and fabricated. The performances of each kind of micro-pumps are studied by frequency
sweeping experiments. Experimental results approximately coincide with the theoretical analysis.

1P1-045

STUDY OF GENE TRANS FECTION ENHANCEMENT AND PARAMET ERS OPTIMIZATION US ING MICROFLUIDICEL ECTROPORATION CHIP …………………………………………………………………………………………………No.181
Yung-Chiang Chung 1, Wei-Jie Liao 1, Yu-Tzu Huang 2, Cheng-Yuan Wu 1, Cheng-Wei Tsai1
1
Department of Mechanical Engineering, Ming Chi University of Technology, New Taipei, Taiwan
2School of Medicine, Fu Jen Catholic University, New Taipei, Taiwan
We developed a simple fabrication, low voltage, low power consumption and easy way of enhancing gene transfection efficiency: combining high andlow electric fields, adjusting the voltage, pulse number, duration, buffer and conductivity. The 293T cells (Human Embryonic Kidney cells) were tested.
The optimum combining condition was a high electric field 1600 V/cm for 0.6 ms × 2 and low electric field 800 V/cm for 1.2 ms × 3. It resulted in asurvival rate larger than 70%, and the transfection rate was about 45%. The buffer of the largest transfection rate was Hypoosmolar. The conductivity ofthe buffer was an important parameter, and the appropriate value was 1.0-3.6 mS/cm. The transfection rate of 293T cells using Cytoporation buffer could
be enhanced by adding potassium ion, and the volume ratio should be lower than 2%.

1P1-046

CNTs GATED NANOFLUIDIC S YS TEM FOR SINGLE B ACTERIUM DET ECTION B Y GNPs-BAS ED REDOX S IGNALAMPLIFICATION ……………………………………………………………………………………………………………No.187
Po-Chao Wen 1,Jen-Kuei Wu 1, Hwan-You Chang 2 and Fan-Gang Tseng 1,3
1
Department of Engineering and System Science, National Tsing Hua University, Taiwan
2
Department of Li fe Science, National Tsing Hua University, Taiwan
3
Division of Mechanics, Research Center for Applied Sciences, Taiwan
In this work, we report a portable microfluidic chip based on gold nanoparticle-enhanced electrochemical detection for single-bacteria diognostic. The
possibility of single-bacteria detection is realized here by using electroactive molecules modified on gold nanoparticles (NPs) to detect and differentiate
Staphylococcus aureus and Pseudomonas aeruginosa. The detection limit of these two electroactive molecules is near femtomolar (1 pM) whenimmobilized on gold nanoparticles (NPs), and the minima amounts of gold NPs required in the detection is around thousands (103 particle/μl). A
concentration of couples whole bacteria (<10 cells/μl) is detected by CV measurements. The liner detection limit concention is form 1-1000 cells/μl. The
results showed that the portable biochip system has great potential as a device for single-particle or possibly even single-organism detection.

1P1-047OPTIMIZ ED CAPILLARY BAS ED MICROARRAY US ED FOR DNA ANALYS IS ……………………………………No.195
Hong Chen 1,2, Likai Ge1, 2, Zezh i Zheng 1,2, Xiang meng Qu 1,2 , Xiao ling Lan 1,2
1
Department of Mechanical and Electrical Engineering, Xiamen University, China
2
MEMS Research Center of Xiamen University, Xiamen University, China
M icroarray is an very useful tool for nucleic acid detection, but the procedure is labor intensive and time consuming. M icrofluidic chip-based microarraysaves time with better performance, whlie the low spot density and probe number limit its applications in many related fields. To develop highperformance microarray with higher spot density and probe number, a method is reported here to prepare microarray in a capillary by generating probe
droplets array. The probes in droplets are immobilized onto the inner wall of the capillary to form an one-dimensional probe array, and then a sample
solution is introduced to hybridize with the probe array. This paper demonstrated the droplets array, probe array and hybridized spots array which weregenerated inside the capillary, then the cross contamination caused by the generation of droplets array was evaluated. Data showed that the crosscontamination was only a very small portion. It can be regarded as the background and eliminated by subtracting.

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1P1-048

EXPERIMENTAL AND THEORETICAL STUDY OF HYDRODYNAMIC CELL LYS ING OF CANCER CELLS IN A
HIGH-THROUGHPUT CIRCULAR MULTI-CHANNEL MICROFILTRATION DEVICE ……………………………No.231
W. Ma1, D. Liu 2, H. Shagoshtasbi1, A. Shukla1 , E. S. Nugroho 1, Y. Zohar3, Y.-K. Lee1
1
Dept. of Mechanical Engineering, Hong Kong University of Science and Technology, Hong Kong
2
Guangzhou First Municipal People's Hospital, Guangzhou 510180, China
3
Department of Aerospace and Mechanical Engineering, University of Arizona, Tucson, AZ 85271, USA
M icrofiltration is an important microfluidic technique suitable for enrichment and isolation of cells. However, cell lysing could occur due tohydrodynamic damage that may be detrimental for medical diagnostics. Therefore, we conducted a systematic study of hydrodynamic cell lysing in ahighthroughput Circular M ulti-Channel M icrofiltration (CMCM ) device integrated with a polycarbonate membrane. HeLa cells (cervical cancer cells)
were driven into the CMCM at different flow rates. The viability of the cells in the CMCM was examined by fluorescence microscopy using Acridine
Orange (AO)/ Ethidium Bromide (EB) as a marker for viable/dead cells. A simple analytical cell viability model was derived and a 3D numerical model
was constructed to examine the correlation of between cell lysing and applied shear stress under varying flow rate and Reynolds number. The measured
cell viability as a function of the shear stress was consistent with theoretical and numerical predictions when accounting for cell size distribution.

1P1-049

EL ECTRIC MANIPULATION OF DROPLETS IN MICROFLUIDICS …………………………………………………No.248
Hongbo Zhou 1,2, Shuhuai Yao 1
1
Department of Mechanical Engineering, the Hong Kong University of Science and Technology, Hong Kong
2
State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academyof Science, Shanghai, China
Precharged droplets can facilitate manipulation and control of low-volume liquids in droplet-based microfluidics. In this paper, we demonstratenon-contact electrostatic charging of droplets by polarizing a neutral droplet and splitting it into two oppositely charged daughter droplets in a T-junction
microchannel. Using numerical methods for two-phase flow coupling with electrostatics, for the first time, we performed parametric study to understandthe mechanism of charging process. Moreover, cases (such as T-junctions with a notch, different sizes of droplets, and surfactants) were explored forpractical applications. Finally, we demonstrated effective droplet manipulation in a sorting unit appending to the droplet charging.

1P1-050SIMULATION AND FABRICATION OF CAPILLARY-DRIVEN MEANDER MICROMIXER FOR S HORT-DIS TANCEMIXING …………………………………………………………………………………………………………………………No.602
C.K. Chung 1,2, C.C. Lai1, T. R. Sh ih 1 and E. C. Chang 2
1
Dep’t of Mechanical Engineering, National Cheng Kung University, Tainan, Taiwan
2
Center for Micro/Nano Science and Technology, National Cheng Kung University, Tainan, Taiwan
In this article, the micromixer with the planar design, short mixing distance, long-term high hydrophilic property and with power-free rapid fluid
transport functions has been demonstrated compared with conventional syringe pump micormixers. The short-term capillary-driven micromixers withcomplex mixing structures have proven with large potential with the mixing ability and no power input advantages that it can be use in instant medical
examination and medicine fabrication. Here, we have demonstrated the long-term capillary-driven meander micromixer with the planar design, shortmixing distance, and rapid fluid transport functions. The contact angle measurement was made for verifying surface property of various materials andboth glass and JSR are good candidates. The Glass-JSR-Glass capillary-driven meander micromixer can improve mixing efficiency up to over 95% atonly 8 mm short distance.

1P1-051

RES ISTIVE SWITCHING MODEL FOR EL ECTROLYTE-OXIDE-S EMICONDUCTOR (EOS) STRUCTURE ……No.279
X. Y. Ma, G. C. Sun, Y. F. Chen, W. G. Wu
National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, China
We find that the Electrolyte-Oxide-Semiconductor (EOS) structure, which is utilized a lot in micro/nanofluidic devices, is not perfectly insulated aspreviously believed. There is a significant leakage current through the insulator, and the I-V relationship shows one-way conductivity like a diode. We
build a model considering the implantation of ions under forward bias and formation of conductive filaments in the oxide layer. Samples with oxide
layers of different thicknesses and various fabrication processes were tested to verify our hypotheses. This structure provides a simple means to fabricate
half-fluidic diodes, and can be utilized for ion detection and current control in microfluidic devices.

1P1-052

SIMULATION OF BACKWARD FACING STEP FLOW AT THE OUTLET MICRO-CHANNEL AND OPTIMAL DES IGN
OF AMPEROMETRIC DETECTION CHIP ………………………………………………………………………………No.290
Xiao we Liu, He Zhang, Xiaowei Han, Lin Zhao
Key Laboratory of Micro-systems and Micro-structures Manufacturing, Ministry of Education,Harbin, China
In this paper, we discussed the vortex which cause by the step structure at the outlet of microchannel. When the thickness of boundary layer and theheight of the channel are fixed value, the vortex area length was decided by Reynolds number. COM SOL M ultiphysics simulations based on the
turbulence model were performed to provide a better understanding of the Reynolds number and the length of vortex area in the compound structure
microfludic amperometric detection chip. According to the simulation results, we discussed the value for the height of the microchannel and the thicknessof auxiliary bonding layer, we determined the manufacture parameters and assembly process of the microfluidic chip. Furthermore through the simulation
results discussion of the microfluidic properties, we described how to set experiment conditions for amperometric detection.

1P1-053

DROPLET FORMATION IN A T-S HAPED MICROFLUIDIC J UNCTION US ING PRESS URE-DRIVEN PUMPING……………………………………………………………………………………………………………………………………No.302
Qiong Wei1, Yao Teng 2, Chunyang Xiong 1,2

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1College of Engineering, Peking University, Beijing 100871, China
Academy for Advanced Interdisciplinary Studies, Peking University, Beijing 100871, China

2Here we experimentally study how the droplet formation in a T-shaped junction varies as the inlets pressure change by using a precise pressure-driven
pump. The droplet length (L) and its production frequency (f) are measured as a function of the inlet driving pressure ratio of the dispersed to continuous
phase (Pw/Po), respectively. A minimum pressure ratio for generating drops is found to be approximate 0.55 in our experiments. Results are comparedwith those of a system driven by syringe pumps which can vary the ratio of volume flow rate (Qw/Qo). Significant difference in the variation of droplet
size exists between these two driven approaches when varying the flow control parameters: droplet size is more sensitive to the inlets pressure ratio.

1P1-054

MICROFLUIDIC DEVICES WITH THREE-DIMENS IONAL GOLD NANOSTRUCTURE FOR S URFACE ENHANCEDRAMAN SCATTERING ………………………………………………………………………………………………………No.343
R. Takahashi, T. Fu kuoka, Y. Utsumi, A. Yamaguchi
Laboratory of Advanced Science and Technology for Industry, University of Hyogo, Japan
Rapid and sensitive chemical sensing using microfluidic device equipped with sterically-bulky three-dimensional gold nanostructure (Au3D) was
demonstrated. Au3D was expected as surface enhanced Raman scattering (SERS) active structure. Au3D was fabricated by convective self-assembly
known as “coffee-ring” of the mixed solution of gold colloidal nanoparticle and polystyrene latex particle. SERS measurements of a trace amount of
4,4’-bipyridine (4bpy) in aqueous solution were performed using Au3D in batch and flow format, and typical spectrum of 4bpy with enhanced peaks
were immediately observed after dropping (batch) or injecting (flow). While detection limit was about 10 nM 4bpy in batch measurement, detection offurther enhanced spectrum of 1 nM 4bpy was accomplished in flow measurement. We confirmed that Au3D was available for convenient SERS
optofluidic measurement.

1P1-055

AN EXPERIMENTAL INVESTIGATION OF MICRO PULSATING HEAT PIPES ……………………………………No.396
K.-S. Yang 1, Y.-C. Cheng 2, M.-S. Jeng 1, K.-H. Ch ien 1, J.-C. Shyu 2
1
Green Energy and Environment Research Lab., Industrial Technology Research Institute, Taiwan
2
Department of Mechanical Engineering, National Kaohsiung University of Applied Sciences, Taiwan

Si-based micro pulsating heat pipes (μPHP) charged with HFE-7100 were tested at several heating powers with two orientations, θ = 00 and 900. The
width of the channel is 0.8 mm in a μPHP having uniform channels, and 1.0 mm or 0.6 mm in the other μPHP. The depth of each channel is 0.25 mm.
The overall size of each μPHP is 60 mm × 10 mm × 1.25 mm. Both visual observation and temperature response of the present μPHPs at various
conditions were performed. The performance was compared between two μPHPs having either uniform channels or non-uniform channels at difference
heating powers. Results showed that both μPHPs could not start the pulsating two-phase flow in the channel of μPHPs as the μPHPs were operated
horizontally at heating power ranging from 1 W to 7 W, except when the μPHP having non-uniform channels was tested at heating power of 7 W. Unlike
the failure start-up for horizontal arrangement of μPHPs, μPHPs with a vertical arrangement shows a significant start-up phenomenon for both μPHPs
with uniform and non-uniform channels due to the assistance in the start-up of both μPHPs arising from gravity force.

1P1-056

COMPARATIVE S TUDY OF PID CONTROL AND MODEL PREDICTIVE CONTROL FOR A MICROFLUIDICEL ECTROPORATION S YS TEM ……………………………………………………………………………………………No.406
M. Ghadami1,2, H. Shagoshtasbi1, M.J. Mahjoob 2, Y.-K. Lee1
1
Department of Mechanical Engineering, HKUST, Kowloon, Hong Kong
2
Mechatronics Engineering Department, University of Tehran, Kish Int'l Campus, Kish Island, IranThis paper describes a comparative study of two feedback control methods for a microfluidic electroporation (EP) system. The regulation of thetransmembrane voltage (Vm) and nano-electropore radius (r) of HeLa cells on a micro EP chip was achieved using a linear
Proportional-Integral-Derivative (PID) Controller and also Model Predictive Controller (MPC) based on the critical electric field for single-cell EP.
Numerical simulations of static and dynamic responses of the two critical states, Vm and r, shows that feedback control can improve the cell viability andEP efficiency compared to open-loop (OL) system. The benefits and limitations of these two control methods for EP and possible future works have also
been discussed.

1P1-057

MICRO DIFFUS ER-TYPE MOVEMENT INVERS ION SORTER FOR HIGH- EFFICIENT SPERM SORTING …No.461
Yu -Nan Lin and Peng-Chun Chen and Ren-Guei Wu and Li-Chern Pan and Fan-Gang Tseng
Department of Engineering and System Science , National Tsing Hua University, Taiwan
In this study, we propose a microfluidic device with a diffuser type chamber to differentiate the sperm velocity by gradually lowering down the flow
speed in diffuser by gradually increasing the width of the channel. When the sperms’ moving speed match the flow speed, the sperms tend to have theability to flow against the stream, thus separating the sperms at different specific positions along the diffuser according to their motility becomes gentle
and fast. Most of the motile sperm will stay in the expanding area and the non-motile sperms will drift to outlet. Different from the previous study weproposed in IEEE NEM S , 2012 , here we have three improvements: (1) Sperms can be separated in more detailed quality level. (2) Sperm will be more
activated by passing through a dumb bell area than by the traditional methods. (3) The space in the device can accumulate large amount of sperms(~millions).

1P1-058

DES IGN OF DET ECTION ELECTRODE ON CONTACTLESS CONDUCTIVITY DET ECTION IN CAPILLARYEL ECTROPHORES IS MICROCHIP ………………………………………………………………………………………No.479
Haifeng Zhang 1,2,Xiao wei Liu 1,2 , Xiaoshu Zhang 1, Rui Weng 1
1
MEMS Center, Harbin Institute of Technology, Harbin, China

70

2

Key Laboratory of Micro-systems and Micro-structures Manufacturing (Harbin Institute of Technology), China

Contactless conductivity detection has attained great attention in the last decade in capillary electrophoresis. But contactless conductivity detection isrestricted by its sensitivity, how to improve detection sensitivity has become the key of contactless conductivity. In this paper a novel extended model forthe detection cell consisting of a network of resistors and capacitors is proposed according to the structure of contactless conductivity detection. The
effect of the detector geometry on the sensitivity of contactless conductivity is studied. By simulation, the optimal parameters are obtained. Sandwichelectrode structure was established to improve the performance of the detector and minimize the stray capacitance between theelectrodes. Using the optimal electrode structure, the two peaks corresponding to K+ and M g2+ are clearly resolved with complete separation.

1P1-059

US ING THE NEWLY MICROFLUIDIC CHIP TO PRODUCE THE UNIFORM EMULS IONS WITH DIFFERENTCONCENTRATIONS …………………………………………………………………………………………………………No.552
Chia-Hsien. Yeh and Yu-Cheng Lin
Department of Engineering Science, National Cheng Kung University, Tainan, Taiwan.
The newly microfluidic chip successfully uses the micro-mixer and flow-focusing device to produce the water droplets with eleven different trypan blue
concentrations, and applies these chitosan microparticles for encapsulating the magnetic nanoparticles. The sizes of these eleven types of water droplet
with different trypan blue concentrations are uniform with a coefficient of variation less than 10%, and the chitosan emulsions with eleven different
Fe3O4 nanoparticles concentrations are used for magnetic targets, and the chitosan microparticles size is ranged from 44 μm to 83 μm in diameter.

1P1-060

THE S TUDY OF THE ENHANCEMENT OF MICRO-VIBRATION-INDUCED HARVES TER B AS ED ON VAPOR
IMPACTING ……………………………………………………………………………………………………………………No.155
J. C. Hsieh 1, J. L. Lin 2, S. C. Shen 3, David. T. W. Lin 2
1
Green Energy and Environment Research Laboratories, Industrial Technology Research Institute, Hsinchu, Taiwan
2
Institute of Mechatronic System Engineering, National University of Tainan, Tainan, Taiwan
3
Department of Systems and Naval Mechatronic Engineering, University of National Cheng Kung, Tainan, Taiwan
With technology rapidly advance, the energy of demand is also with the greatly increased. Therefore, the development of new energy or energy
harvesting attracts much attention. Our group has proposed an innovated micro heat pipe harvester based on the micro-piezoelectric vibration-induced
power device. The deformation of the piezoelectric material by vapors impacting enables it to convert the vapor momentum to the power. In this paper,
the purpose is to enhance the output of the micro heat pipe generator by the optimization of the vibration-induced device. A suitable cantilever beamcombined with piezoelectric material is designed by multiphysics and genetic algorithm. The optimal geometry is found to approach its natural frequency.
The experimental results show that the power improves about 293.38%. Through this study, the micro heat pipe generator will be practiced and approach
the available usage.

1P1-061

INORGANIC ELECTRET WITH ENHANCED CHARGE STAB ILITY FOR EN ERGY HARVES TING ……………No.159
Fei Wang 1, Ole Hansen 1, 2
1
Department of Micro- and Nanotechnology, Technical University of Denmark, DTU Nanotech, Lyngby, Denmark
2
CINF - Center for Individual Nanoparticle Functionality, Technical University of Denmark, Lyngby, Denmark
We report a new surface treatment of inorganic electret materials which enhances the charge stability. Coating the surfaces with 1H, 1H, 2H, 2H perfluorodecyltrichlorosilane (FDTS) makes the electret surface more hydrophobic which improves the surface charge stability under high humidity
conditions. Thermal tests show that the thermal stability of charge in the inorganic electrets is also much better than that of polymer materials such as
CYTOP. A demonstrator device with SiO2 electrets shows promising results for energy harvesting applications.

1P1-062

THERMAL CONDUCTIVITY OF S INGL E-WALL CARBON NANOTUB ES FILLED WITH WATER ……………No.219
Hui Chen, Chun Wei Zhang
Department of Mechanical Engineering, Southeast University, Nanjing 210096, China
Thermal conductivities for single-wall carbon nanotubes (SWNTs) filled with water are calculated with non-equilibrium molecular dynamics (NEMD)
simulation method. Simulation results demonstrate the thermal conduction for the tube filed with water is better than the pure nanotube at the same
conditions. It is believed the translational movement of the water molecules along the tube axis helps carry energy from the hot bath to the heat sinks,
which results in the increase of the thermal conductivities. In addition, with the introduction of the water molecules into the nanotube, the additional
interaction between the carbon atoms and the water molecules provide extra channels for phonon transport, which further intensifies the energy transport
along the nanotubes. The effects of the temperature variation and the tube length on the thermal conductivities are also analyzed in this paper.

1P1-063

OPTIMIZATION OF THE MICRO CHANNEL LADDER S HAPE HEAT SINK ………………………………………No.223
Chung-Hao Kang 1,2, Shih-Hsiang Tai1 , Sheng-Chung Chen 1, Dav id T.W. Lin 1
1
Institute of Mechatronic System Engineering, National University of Tainan, Tainan, Taiwan
2
New Energy Division, MAG Technology CO., LTD, Tainan, Taiwan
The channel heat sink is in contact with the working fluid to remove the heat. But much channel will result higher pressure difference issue in the micro
multi-channel heat sink. In this paper, a ladder shape channel (link between the parallel channel) is proposed to correct the problem of high pressure
difference. The design of the link decreases the pressure difference for reducing the pump work of the micro multichannel heat sink. The purpose of thispaper is to maximize the efficiency of the micro multi-channel ladder shape heat sink by using optimization design. An optimization method based on thegenetic algorithm and COM SOL 3-D conjugated thermal-fluid model is applied to establish the optimal geometry parameters of the link. The results
show that this heat sink design can improve the efficiency more than 43%. And the heat removal of the proposed device is significantly improved.

711P1-064

LOW FREQUENCY PVDF PIEZOEL ECTRIC ENERGY HARVES TER WITH COMB INED d3 1 AND d33 OPERATING
MODES …………………………………………………………………………………………………………………………No.242
Mengdi Han, Yi Ch iang Chan, Wen Liu, Shouhe Zhang, Haixia Zhang
Institute of Microelectronics, Peking University, China
This paper reports the design, test and application of a novel low frequency piezoelectric energy harvester. To achieve high output voltage at low
frequency, both d31 and d33 modes of polyvinylidene fluoride (PVDF) are utilized in this device. Output voltage of the device are tested under different
frequencies and accelerations. Rectifying bridge is used to reverse signals with negative signs and capacitors can be charged to light up a light emitting
diode (LED).

1P1-065

LOW FREQUENCY VIB RATION ENERGY HARVES TING FROM HUMAN MOTION US ING IPMC CANTILEV ER
WITH EL ECTROMAGNECTIC TRANSDUCTION ………………………………………………………………………No.317
Kean C. Aw, Siva V. Praneeth
Department of Mechanical Engineering, The University of Auckland, New ZealandThis research aims as a proof of concept for a vibration energy harvester using human motion as the energy source. Human motion consists of burst of
low frequency vibrational kinetic energy. The high acceleration burst is usually 1. 5 to 2 g when the foot strikes the ground and an ionic polymer metallic
composite (IPMC) can be used to harvest this energy via two methods. The first method is via the bending of the IPMC causing the mobile cations tomove and produces an output voltage pulse, hence capacitive transduction. Secondly, the IPMC in a beam form that resonate at the low vibration
frequency due to its relatively low Young’s modulus can scavenge additional secondary energy via external electromagnetic transduction to supplement
the primary harvested energy via the IPMC capacitive transduction.

1P1-066

IMPROVEMENT OF SOLID OXIDE FUEL CELL B Y IMPRINTED PATTERNS ON EEL ECTROLYTE …………No.404
Yang Xu, Fujio Tsumori*, Seiya Hashimoto, Masashi Takahashi, Hyungoo Kang, Toshiko Osada, Hideshi Miura
Faculty of Engineering, Kyushu University, Japan
This paper reports an improved interfacial structure between electrode and electrolyte of Solid Oxide Fuel Cell (SOFC). We employed an imprint process
to give fine patterns onto a ceramic electrolyte sheet. The imprint process is a powerful tool to transcribe nano- to micro-patterns on materials.In thepresent work, a sheet of ceramic compound material was prepared, and micro patterns were given on the sheet. After debinding and sintering, dense
ceramic sheet with fine patterns were obtained. We prepared three kinds of electrolyte sheets with different surface patterns using this technique. After
applying anode and cathode layers, the three fuel cell samples were assembled to test the cell performance. It was resulted that the finer pattern caused
the best performance in the three samples.

1P1-067

SIMULATION ANALYS IS OF TRANS IENT PIEZOEL ECTRIC PROPERTIES OF PVDF STRUCTURE FOR ENERGYCONVERS ION APPLICATIONS ……………………………………………………………………………………………No.452
Lun Zhu, Zhaoyang Pi, David Wei Zhang, Dongping Wu
State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai, China
Rapid development of wireless sensor networks and portable electronic devices calls for solutions to self-powered micro-systems. In this work, twomodels based on poly- vinylidene fluoride (PvDF) structures which convert mechanical energy into electric energy are studied via COM SOL MultiPhysics simulation. A series of time-dependent transient analyses are performed and it is found that strains and output voltages generally follow thechanges of applied stresses when the frequency of the applied stress is at 1 Hz. With a fixed frequency, output voltage and short circuit current increase
with applied strain and with a fixed strain, the current increases with the frequency while the output voltage remains relatively stable. The theoreticalenergy conversion coefficient is 14.4% for the cantilever model and 13.2% for the membrane model.

1P1-068

RES EARCH ABOUT TOP EL ECTRODE IMPROVEMENT OF ZnO NANOWIRES ARRAY
NANOGEN ERATOR ……………………………………………………………………………………………………………No.470
Shaohua Wu 1, Li Xiao 1, 2, Yundong Xuan 1, 2, Zhan Zhao 1, Deyi Kong 3, Lidong Du 1, Zhen Fang 1
1State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences. Beijing, China.
2
Graduate University of Chinese Academy of Sciences, Beijing, China.
3
State Key Laboratory of Transducer Technology, Institute of Intelligent Machines, Chinese Academy of Sciences. Hefei, China.
A novel method to fabricate the top electrode of ZnO nanogenerator is introduced in the article. Hydrothermal synthesis is adopted to grow ZnO
nanowires array structure. And the sputtering process is employed as a simple fabrication method to form the top electrode. Scanning electron
microscope (SEM ) analysis has been carried out to identify different layers in nanogenerator. The energy harvesting experiment of the nanogenerator
excited by ultrasonic wave has been complete as well in the research. Experiment results reveal that the maximum output voltage reaches about 0.23V.

1P1-069FABRICATION OF MEMB RANE-TYPED METAL MOULD WITH MICROSTRUCTURES AND APPLICATION FORROLLER IMPRINTING ……………………………………………………………………………………………………No.112
Yu -Hsiang Tang*, Yu-Hsin Lin, Jr-Jung Yang, and Ming-Hua Shiao
Instrument Technology Research Center, National Applied Research Laboratories, 300, Taiwan
In this paper, we focus on the development of membrane-typed metal mould with microstructures for imprinting. This mould has several benefits
including reusable, easy replaceable core, and low cost that strongly improves industrial values in microstructure mass production. The membrane-typed
metal mould with a thickness of 60 μm can be attached to a level mould or a roller mould, and becomes a metal core for the polymer microstructure
imprint for mass production of products over large surface area. Photolithography, electroforming, and grinding techniques have been integrated in order72

to develop the membrane-typed metal mould in this research. It has been proven that the metal mould of micro pillars could be successfully fabricated.
This metal mould was fabricated by precision electroforming technology that Ni-Co alloy was deposited on a photoresist mould, and further peeled off toattach onto a level mould. The hardness, stiffness and toughness of the Ni-Co alloy material core structure were sufficient and strong enough for reusable
duration. The durability of this membrane-typed metal mould has been greatly enhanced. Furthermore, by applying roller assisted attaching mechanism,
the interface between the mould and Ni-Co alloy core became more inseparable and flat. According to the experimental measurement results, theuniformity has been controlled between ± 5 μm. The reproducing accuracy of the polymer microstructures can also be effectively enhanced.

1P1-070

PRINT-TO-PRINT: A FACILE FLEXIB LE MULTI-OBJ ECT PATTERNING PROCESS US ING S UPERHYDROPHOB ICFILMS …………………………………………………………………………………………………………………………No.137
Siyuan Xing, Siwei Zhao, Tingrui Pan
Department of Biomedical Engineering, University of California, Davis, USA
In this paper, we present a simple versatile printing-based method, referred to as Print-to-Print (P2P), to form multi-object micropatterns for potential
biological applications, along with our recent efforts to deliver out-of-cleanroom microfabrication solutions to the general public. The P2P method
employs only a commercially available solid-phase printer and reusable superhydrophobic films developed by us. The whole process does not involve
any thermal or chemical treatment. Moreover, the non-contact nature of droplet transferring and printing steps can be highly advantageous for sensitive
biological uses. Using the P2P process, a minimal feature resolution of 229μm has been successfully demonstrated. In addition, this approach has been
applied to form biological micropatterning on various substrates as well as multi-object co-patterns on the commonly used surfaces. Finally, thereusability of superhydrophobic substrates has also been illustrated.

1P1-071

INVES TIGATIONS OF S ILICON WAFER BONDING US ING THIN AL AND SN FILMS FOR HETEROGENEOUS
INTEGRATION ………………………………………………………………………………………………………………No.142
Zhiyuan Zhu 1, Shaonan Wang 1, Yichao Xu 1 , Guanjiang Wang 1, Yudan Pi1, Peiquan Wang 1, Yunhui Zhu 1, Xin Sun 1, Min Yu 1, Jing
Chen 1, M in Miao 1,2, Yufeng Jin 1
1
National Key Laboratory of Nano/Micro Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, China
2
Institute of Information Microsystem, Beijing Information Science & Technology University, Beijing, China
M etallic wafer bonding has emerged as a key technology for microelectronics and MEM S. The Si wafers with
Al metallization film on surface are bonded by applying Sn film as intermediate layer, aiming at the application of heterogeneous integration. Averaged
shear strength of 9.9 MPa is realized at bonding temperature as low as 280℃ with bonding time as short as 3 minutes under the bonding pressure of 0.25
MPa. Interface microstructure and fracture surface analysis were carried out to understand the underlying mechanism.

1P1-072

SURFACE TENS ION-INDUCED HIGH ASPECT-RATIO PDMS MICROPILLARS WITH CONCAVE AND CONVEXLENS TIPS ………………………………………………………………………………………………………………………No.153
Huawei Li, Yiq iang Fan, Ying Yi, Ian G. Foulds
Electromechanical Microsystems & Polymer Integration Research (EMPIRe) Group
Computer, Electrical & Mathematical Sciences & Engineering Division (CEMSE)King Abdullah University of Science and Technology (KAUST), Saudi Arabia
This paper reports a novel method for the fabrication of 3-dimensional (3D) Polydimethylsiloxane (PDM S) micropillars with concave and convex lens
tips in a one-step molding process, using a CO2 laser-machined Poly(methyl methacrylate) (PMMA) mold with through holes. The PDM S micropillars
are 4 mm high and have an aspect ratio of 25:1. The micropillars are formed by capillary force drawing up PDM S into the through hole mold. The
concave and convex lens tips of the PDM S cylindrical micropillars are induced by surface tension and are controllable by changing the surface wetting
properties of the through holes in the PMMA mold. This technique eliminates the requirements of expensive and complicated facilities to prepare a 3D
mold, and it provides a simple and rapid method to fabricate 3D PDM S micropillars with controllable dimensions and tip shapes.

1P1-073

IN-LINE TES TING OF BLIND TSVs FOR 3D IC INTEGRATION AND M/ NEMS PACKAGING ……………………No.169
Yichao Xu 1 , Guan jiang Wang 1, Xin Sun 2, Runiu Fang 2, Min M iao 2, 3, Yufeng Jin 1, 2
1Peking University Shenzhen Graduate School, Shenzhen, China
2
National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, China
3
Information Microsystems Institute, Beijing Information Science and Technology University, Beijing, China
An in-line testing procedure of blind TSVs is put forward in this study. Insulation integrity is chosen to determine the eligibility. It is to probe the upper
end of two or more neighboring TSVs during the manufacturing right after the blind vias being formed. Finite element method simulation was used toillustrate the testing principle, and experimental test were carried out for validation. During the test, leakage current data between two blind vias is
obtained and I-V characteristic curve is plotted. It can be determined whether or not the TSVs are qualified.

1P1-074FABRICATION OF S UB-WAVEL ENGTH STRUCTURES ON S ILICON DIOXIDE …………………………………No.171
Mao-Jung Huang, Yu-Hsiang Tang, Ch ien-Ying Su and Ming-Hua Shiao
Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu, Taiwan
Sub-wavelength structure (SWS) as an effective method to suppress reflection of silicon material for many years [1-2]. Recently, the SWS was also
employed in a transparent material, and hence the properties of transmission can be measured [3]. This work we present a process combining nanospherelithography (NIL) and reactive ion etching (RIE) to fabricate arrayed nanostructure on commercially available slide glass. In additionally, we depositedan Au film of 20 nm on the substrate surface to suppress the transmission in the infrared wavelength for application of insulated window.

73

1P1-075

SN-RICH Au-Sn HERMETIC PACKAGING AT WAFER LEVEL AND ITS APPLICATION IN SPR S ENSOR ……No.172
Xu Mao 1,3, Zh iqiang Fang 1,3, Zhe Zhang 2,3, Jin ling Yang 1,3, Zh imei Qi2, 3, and Fuhua Yang 1
1
Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2
Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China
3
State Key Laboratory of Transducer Technology, Shanghai 200050, China
Sn-rich Au-Sn solder bonding has been systematically investigated for low cost and low temperature wafer-level hermetic packaging of high-end M EM S
devices. The AuSn2 phase with the highest Vickers-hardness among the four stable intermetallic compounds of Au-Sn system makes major contribution
to the high bonding strength. The maximum shear strength of 64 MPa and a leak rate lower than 1 × 10-7 torr·l/s have been obtained for Au46Sn54 solder
bonded at 310 °C. This bonding method has been successfully used to package the SPR sensors, and dramatically simplifies the sensor structure andfabrication process. The bonding results indicate that the Sn-rich Au-Sn solder bonding has provided a reliable, low-cost, low temperature, wafer-level
hermetic packaging solution for MEM S device and has potential applications in high-end compact biomedical sensors.

1P1-076

FABRICATION AND MORPHOLOGICAL CONTROL OF ELECTROSPUN ETHYL CELLULOS E
NANOFIB ERS ……………………………………………………………………………………………………………………No.199
Xiang Wang, Guangqi He, Haiyan Liu, Gaofeng Zheng, Daoheng Sun
Department of Mechanical and Electrical Engineering, Xiamen University, China
Ethyl cellulous (EC) fibrous films were fabricated via electrospinning from solutions with various DMF/acetone volume ratios and the hydrophobic
properties were investigated. The morphology of electrospun EC films reveals a conversion from beads to uniform nanofibers by decreasing the
DMF/acetone ratio. Pure DMF solution leads to bead structures while uniform nanofibers can be obtained from DMF/acetone ratio of 2/3. The fibroussurfaces of electrospun EC films greatly improve their hydrophobicity with the average water contact angles range from 138° to 151°, exceeding that ofspin-coating film (59°). The highest contact angle (151°) was found on the bead-on-string films prepared from the solution with DMF/acetone ratio of
4/1. For this hydrophobic capacity, the electrospun EC films would broaden their applications in the fields of coating and encapsulation.

1P1-077

IN-S ITU MEAS UREMENT OF ION ANGULAR DIS TRIB UTION IN B ULK TITANIUM DRIE FOR MODELING THE
ETCH PROFILE …………………………………………………………………………………………………………………No.201
Jia Hu, Shuwei He, Yiming Zhang, Jing Chen
MEMS Research Center, Institute of Microelectronics, Peking University, China
The bulk titanium deep reactive ion etching (DRIE) enabled high aspect ratio structures and devices are promising for harsh and in vivo environments
applications. An etching model is necessary for better profile control to acquire needed performance, in which a correct ion angular distribution (IAD) in
chlorine plasma is crucial. In this paper, an overhang SU-8 structure is proposed to experimentally in-situ measure the IAD by analyzing the etching
profiles. With these data, a profile evolution model is developed to predict the titanium DRIE process.

1P1-078

FABRICATION AND THER MAL STAB ILITY CHARACTERIZATION OF RU EL ECTRODE US ED FOR HIGH POWER
CONTACT RF MEMS SWITCH ……………………………………………………………………………………………No.203
Hongze Zhang, Zhihong Li
National Key Laboratory of Nano/Micro Fabrication Technology, Peking University, Beijing, China
This paper presents the fabrication and thermal stability of the Ru electrode used for high power Ru-Au contact RF M EM S switch with microspringcontact design. Here we develop a new process with bilayer lift-off and strain release layer to get the 3000 Å Ti/Au/Ru electrode with excellent smoothedge for high power handling and low loss. Furthermore, the thermal test at 400℃, 500℃and 600℃ over 1 hour has been done. Investigation of thesurface with SEM and EDX shows that the electrode has a good thermal stability at 400℃, which is proper for high power handling.

1P1-079

ANNEALING EFFECT ON THE S TAB ILITY OF PLATINUM THIN FILMS COVERED B Y SiO2 OR SiN X
LAYER …………………………………………………………………………………………………………………………No.206
Li Xiao 1,2, Zhan Zhao 1, Lidong Du 1, Shaohua Wu 1,2, Qimin Liu 1,2
1State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing, China
2
Graduate University of Chinese Academy of Sciences, Beijing, China
This study examined the crystal structure and the surface morphology between Pt and SiO2 or SiNx as a glue layer according to the annealing treatment.
The thermal temperature make the surface morphology of the Pt films changed, and the characteristics of Pt thin film resistors under different annealing
temperature also been changed. The resistance of the film will decrease after thermal treatment which the annealing temperature is lower than 480℃, andthe resistor will increase sharply after annealing above 500℃. SiO2 or SiNx layers covered on Pt also have an effect on the characteristics of Pt thin films.

1P1-080SIMULATION OF IMPINGEMENT AND SPREADING OF MICRODROPLET ON NON-HOMOGEN EOUS SOLID
SURFACE ………………………………………………………………………………………………………………………No.207
Chun Yee Lim, Yee Cheong Lam
School of Mechanical and Aerospace Engineering, Nanyang Technological University, Singapore.
This paper presents a numerical study on the impingement and spreading of a micro-sized droplet on a nonhomogenous solid surface. Based on the phasefield method, the numerical model was implemented with finite element method (FEM). Dynamic contact angle, which is dependent on the droplet
contact line velocity, was applied at the contact surface based on Blake’s model and hydrodynamic model. A novel scheme to specify the contact line
velocity based on the phasefield function gradient at the interfacial region has been implemented. Numerical results show that a high wettability

74difference between two surfaces confines the spreading of an impinging micro-sized droplet. Surface wettability patterning can be applied to control thedeposition and spreading of a jetted droplet to produce accurate micro-sized features in electronic circuits.

1P1-081

SURFACE PROPERTY STUDY OF DIFFER ENT PATTERNING SAPPHIRE S TRUCTUR ES B Y ICP-RIE ………No.215
Chun-Ming Chang 1, 2 , Ming-Hua Shiao 1 , Donyau Ch iang 1, Mao-Jung Huang 1, Ch in-Tien Yang 3, Wen-Jeng Hsueh 2
1
Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu, Taiwan
2
Department of Engineering Science and Ocean Engineering, National Taiwan University Taipe,Taiwan
3
Nanotechnology Research Center, Industrial Technology Research Institute, Hsinchu, Taiwan
In this paper, we demonstrate and compare the formation of ordered etching masks for submicron patterned sapphire through use of the nanospherelithography and nanoimprint lithography methods. Both NSL and NIL were applied to produce the submicron honeycomb network and cone protrusionarray structure on the sapphire surface as etching masks. The sequent ICP-RIE technique was applied to further etch the sapphire under the mask. Twotypes of submicron pattern were obtained on the substrate surface after the etching processes were completed. One type of substrate was thesubmicron hole array structure and another type was the cone array structure. The working pressure had a considerable effect on the shape geometry andetching rate. The contact angles of the untreated substrate and two differing patterned sapphire substrates were measured and compared. From the contact
angle measurement results, we concluded that the protruded contact area dominated the hydrophobic or hydrophilic property.

1P1-082

FUNCTIONAL S U-8-PET COMPOSITE MICROCHIP INCLUDING AU MICRODOT ARRAY FAB RICATED B Y LOWTEMPERATUR E POLYMER BONDING ……………………………………………………………………………………No.235
R. Yamamoto, K. Sueyoshi, K. Otsuka, T. Kasahara, A. Nakahara, D. H. Yoon, J. Mizuno, T. Sekiguchi, S. Shoji
Major in Nano-Science and Nano-Engineering, Waseda University, Tokyo, Japan
Au deposited SU-8 microdots comprised SU-8-PET microchip using low temperature polymer bonding technology is developed. A fine microdot array(1μm×1μm×0.5μm dots with 2μm pitch in area of 50μm×5mm) is fabricated by electron beam lithography (EBL) using SU-8 as a negative tone resist. A
microchannel structure is formed with UV patterned SU-8 on a glass substrate. The SU-8 structure is sealed with a PET film by low temperature silane
coupling bonding (140℃, 1.5MPa, 5min). The proposed microchip is fabricated successfully without leakage and is applicable as a microchip
electrophoresis.

1P1-083

FABRICATION OF S ILICON PIEZORES ISTIVE PRESS URE S ENSOR US ING A RELIAB LE WET ETCHING PROCESS……………………………………………………………………………………………………………………………………No.238
Huiming Xu 1,2 , Hong Zhang 1,2, Zhiqiang Deng 1,2, Haisheng San 1,2,Yu xi Yu 3
1
School of Physical and Mechanical&Electrical Engineering, Xiamen University, Xiamen, China
2
Pen-Tung Sah Institute of Micro-Nano Science and technology, Xiamen University, Xiamen, China
3
Fujian Key Laboratory of Advanced Materials, College of Materials, Xiamen University, Xiamen,China
Silicon-based piezoresistive pressure sensors are generally fabricated as a piezo-sensitive diaphragm by using M EM S technology and SOI wafer. Lots ofinnovations and improvements have been made for silicon pressure sensor to increase its performance and reliability. It is found that the quality of Si-Si
bonding will directly affect the performing of SOI substrate removing processes. The main problem is that the etching liquid infiltrate into bonding
interface from the defect position of bonding wafer edge, resulting in the damage and corrosion of bonding wafer. To solve this problem, the paper
presents an etching fixture design for effectively protecting the bonding wafer edge. Experimentally, a SOI-Si bonding wafer with poor quality inbonding edge was used to fabricate the piezoresistive pressure sensors by using the etching fixture. The experimental results show the use of etching
fixture did not damage the bonding wafer and made a nice removal of SOI substrate. The fabricated pressure sensors wafers are also presented.

1P1-084

A NEW EXPERIMENTAL METHODOLOGY US ING POINT DEFL ECTION TO QUANTIFY RES IDUAL STRESS OF
THIN POLYMER MEMBRANE MATERIALS IN MEMS DEVICES ……………………………………………………No.261
Sofiane Soulimane, Arnaud Pouydebasque*, Sébastien Bolis, Fabrice Jacquet, Claudine Bridou x, Flo rian Dupont,Christophe Poulain,
Stéphane Moreau, Stephane Fanget
CEA, LETI, MINATEC Campus, F-38054 Grenoble, France
In this study, a novel methodology to measure the stiffness by point deflection of a flexible polymer layer suspended on liquid using a nano-indenter ispresented. The measurement allows us to extract residual stress values of the polymer material using a simple analytical model. With this method, very
low stress values can be obtained, of the order of 1MPa, with good repeatability. This method allows accurate mechanical behavior prediction anddimensioning of flexible membrane materials used in M icrosystems devices.

1P1-085

A PDMS/ METAL-FILM PHOTO-MAS K FOR LARGE-AREA CONTACT PHOTOLITHOGRAPY AT S UB-MICROMETRSCALE …………………………………………………………………………………………………………………………No.269
Yi-Ta Hsieh 1, Cho-Wei Chang 2, Yung-Chun Lee 1, 2, Fei-Bin Hsiao 3
1
Institution of Nanotechnology and Microsystems Engineering, National Cheng Kung University, Tainan, Taiwan
2
Mechanical Engineering, National Cheng Kung University, Tainan, Taiwan
3
Depertment of Aeronautic Astronautic, National Cheng Kung University, Tainan, Taiwan
This paper report a new type of soft PDM S photomask apply to conventional photolithography process for fabricate sub-micro scale patterns with large
area. This new type of soft PDM S photo-mask is made by soft PDM S material and with the embedded metal layer as an opaque layer. The incident lightwill selectively blocked by the opaque material, and others are guided by the convex PDM S structures to expose the PR layer. Due to its soft and75

compliance property, this new photomask can from intimate contact with substrate and carry out UV exposure in photolithography and forming PR
microstructures. It is particularly useful in patterning slightly cursed substrates such as sapphire wafers. In this work, a hexagonally close-packed array
PDM S/metal-film photo-mask is applied to demonstrate this new type photolithography process, a hole pattern with minimal feature size of 400 nm and ahigh aspect ratio pillar structures with aspect ratio of 2.3 are successfully achieved in both 2” and 4” full scale sapphire wafer. The finite-element
simulation is applied to reveal the energy distribution in the PDM S soft mask. This new type of soft photo-mask can be easily fabricated at a low cost andrepeatedly used for sub-micrometer patterning, and has a great potential in future applications in LED industries.

1P1-086

EFFECT OF PHOSPHORUS DOPING ON THE PERFORMANCE OF Au/Si INTER-DIFFUS ION …………………No.278
Xian Huang 1,2, Fang Yang 2, Danqi Zhao 2, Jun He2 , Xuejiao Fan 2, Wei Wang 2, Dacheng Zhang 2
1
Shenzhen Graduate school, Peking University, Shenzhen, China
2
National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, China
In this work, both phosphorus doped and undoped Au/Si contact structures were investigated by scanning electron microscope (SEM ) and Rutherford
backscattering spectrometry (RBS) analysis after annealing at 350 °C for 30 min. The effect of phosphorus doping on the performance of Au/Si
inter-diffusion is discussed in this paper. The SEM image of the undoped Au/Si contact structure revealed that inverted pyramid-shaped diffusion outline
formed at the contact interface after annealing due to the non-uniformity and anisotropy of Au/Si inter-diffusion. However, when the crystal Si substrate
was heavily phosphorus doped by ion implantation, the inverted pyramid-shaped outline was eliminated and a smooth contact interface was obtained. In
addition, RBS analysis showed that the average diffusion depths in both cases were nearly the same, which indicates the phosphorus doping can alter the
anisotropy of Au/Si interdiffusion but has no significant influence on the Au/Si interdiffusion rate.

1P1-087

RES EARCH ON PROGRAMMAB LE CAPILLARY-FORCE S ELF-ASS EMB LY NANOFAB RICATION …………No.289
Shuhua Wei, Jing Zhang
Department of Microelectronics, College of Information Engineering, North China University of Technology, China
The capillary-force which is an extremely important force in the small objects is considered to be one of the most effective driving forces for the
micro-nanoscale self-assembly. However, the process of capillary-force self-assembly is usually uncontrollable, which has prevented it from being usedin the formation of specific nanoscale devices. In order to explore the fundamentals of capillary-force self-assembly, we analyzed the impact factors ofnanostructures suffered by capillary-force and gave a typical general physical model. Then, we studied the complex structures fabrication method basedon capillary-force self-assembly, and analyzed its characteristics and limitations. Finally, we proposed a new concept of programmable capillary-force
self-assembly to achieve a reliable control of capillary-force, and thus form a new nanofabrication method.

1P1-088

LAS ER ADDITIVE MANUFACTURING TECHNOLOGY IN TITANIUM 64 IMPLANT OF MICROSTRUCTURE
FABRICATION AND ANALYS IS ……………………………………………………………………………………………No.295
S.L. Lin, C.C. Lin, D.Y. Lin, C.S. Chuang
ITRI South, Industrial Technology Research Institute, Liujia District, Tainan City 734, Taiwan
Laser additive manufacturing technology is very attractive for industry applications due to the characterizations of rapid manufacture, flexible parameters
select, customize, and complex 3D object fabricate. In this article, an EOS M -type direct metal laser sintering (DM LS) system was used to manufacture
for customized hip implant with an IPG fiber laser. The part building process takes place inside an enclosed chamber filled with argon gas to minimize
oxidation powdered material. We are successful design and producing an implant of imitation bone microstructure in titanium alloy. From the SEM
analysis image, an approximately 100% dense surface has be observed. The mainly composition of selective laser additive manufacturing product are
acicular structure of alpha-phase titanium. X-ray diffraction patterns also are observed the alpha-phase and betaphase mixture. This customized hip
implant is used to clinical application for replacement the golden retriever's femoral head, and it get good results. Imitation bone structure can promote
the biocompatible of titanium material and bone.

1P1-089

THREE DIMENS IONAL MICRO-MECHANICAL AND MICRO-OPTICAL DEVICES FABRICATED B Y
HOLOGRAPHIC TWO-PHOTON LITHOGRAPHY ………………………………………………………………………No.316
Liang Yang 1, Jiawen Li1 , Jinli Wang 2, Chenchu Zhang 1, Yan lei Hu 1, Yahui Su 2, Wenhao Huang 1, Jiaru Chu
1
Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei,China
2
School of Electrical Engineering and Automation, Anhui University, Hefei, China
Holographic two-photon lithography (HTPL) is a high speed parallel laser fabrication technique inside photosensitive materials based on spatial light
modulation and two-photon polymerization. In this paper, a femtosecond HTPL system was built and femtosecond laser beam was modulated to multibeams with spatial light modulator (SLM ). The quantity and the distribution of the multi foci can be well adjusted according to our design. On this basis,
parallel fabrication of high precision micro-mechanical and micro-optical devices, which has promising application in M EM S, micro-optics,
micro-sensors and so on, was demonstrated. This technique will contribute to the industrialization of femtosencd two-photon polymerization (FTPP) in
the foreseeable future.

1P1-090

PDMS-CYTOP HYB RID STRUCTURE MICROWELL ARRAY CHIP FOR TOTAL INTERNAL REFL ECTION
FLUORES CENCE MICROSCOPY …………………………………………………………………………………………No.355
A. Nakahara, Y. Shirasaki, J. mizuno, T.Sekiguchi, O. Ohara and S. Shoji
Major in Nano-Science and Nano-Engineering, Waseda Univercity, Japan
A microwell arrry device with a hybrid structure of amorphour perfluoroplymer, CYTOPTM, and polydimethylsiloxane (PDM S) which is specialized in
total internal refllection fluorescence (TIRF) microscopy was developed. Since the CYTOP layer, whose refractive index is as same as that of water, is76sandwiched between PDM S and glass substrate, leakage of incident light is avoided. PDM S layer upon the CYTOP enables high aspect ratio structuresand easy integration of microfluidic components. Since direct bonding of CYTOP and PDM S is difficult to achieve, a chemical bonding method using
aminosilane coupling reagent and 3-Glycoidoxypropyltriethoxysilane was applied. The bond strength was about 0.74 M Pa. 24 × 50 microwell array was
fabricated and their optical properties was evaluated. M easured TIRF microscopy results shows no interfere with incident light under the conventionallyused conditions.

1P1-091

FABRICATION AND ANALYS IS OF THREE-DIMENS IONAL OBJ ECT US ING LAYERWIS E MANUFACTURINGTECHNOLOGY ………………………………………………………………………………………………………………No.361
S.L. Lin, C.C. Lin, D.Y. Lin, C.S. Chuang
ITRI South, Industrial Technology Research Institute, Liujia District, Tainan City 734, Taiwan
Layerwise manufacturing technology exhibits a high potential in the field of rapid manufacturing, due to its capability to directly build up
three-dimensional metallic components. In this research, we established a layerwise manufacturing platform having YLR 500 AC fiber laser and an
enclosed chamber vacuumed to minimize oxidation powdered material. From relationship of laser power and scanning speed can observe the variation of
weld width. It assists to find the suitable laser parameters for laser additive manufacturing at blue region. The morphology of titanium specimen was
analyzed by SEM image examined, and some porous structure formed due to the surface tension and oxide effect. The result of mechanical strength of
366.16 MPa was proved to be smaller than common bulk material. The X-ray diffraction patterns of titanium specimen has higher crystallization from
R(110), R(101) and R(200). We have successfully fabrication a three-dimensional object and analysis its material properties.

1P1-092

FABRICATION OF S ILICON NANOSTRUCTURES VIA SILVER CATALYZ ED CHEMICAL WET ETCHING …No.368
Bingfei Dou, Rui Jia, Chen Chen, Haofeng Li, Yun Sun, Xinyu Liu, Tianchun Ye
Institute of Microelectronics, Chinese Academy of Sciences, Beijing, China
Silicon nanostructures have been synthesized by silver catalyzed wet etching methods. A one-step method was used to produce nanowires array, and a
two-step methods were used to produce nano-holes array. For the one-step method, silicon wafers were etched in hydrofluoric acid/silver salt mixture
solution. While for the two-step method, firstly silver nanoparticles were formed through rapid thermal annealing of silver thin films. The temperature,
duration of annealing and initial thickness of the silver film jointly determined the distribution and diameter of silver particles. In the next step, siliconnanostructures were created using silver catalyzed etching in hydrofluoric acid/oxidizing agent solution. The experiment confirmed that the final sizes of
the nanostructures corresponded to the diameters of the silver particles, and the length of nanostructures correlated with the Ag catalyzed etching
duration.

1P1-093DISCUSSION ON THE LAPPING AND POLISHING PROCESS OF 4 H-SiC WAFER ………………………………No.384
Wei Cheng, Yugang Yin, Yipan Li, Haoer Zhang, Shiming Zhang, Lingyun Wang, Daoheng Sun
Department of Mechanical and Electrical Engineering, Xiamen University, Xiamen, Fujian, China
In order to achieve a high quality silicon carbide (SiC) film, the lapping and polishing process scheme was introduced in this paper. The ductile iron was
utilized as lapping disc material, which can quickly thin the SiC wafer to the film of uniform thickness. After three-step lapping process, the thickness of
the SiC wafer was reduced to 35 ± 4μm. In the process of polishing, a rough polishing and a fine polishing were studied by selecting suitable polishingliquid, polishing pad and parameters. The results show that the lapping and polishing procedure can realize large area and high quality SiC films: the film
thickness, 30 ± 2μm and the surface roughness RM S, 0.69nm.

1P1-094

IMPROVED EL ECTRICAL CONDUCTIVITY OF PANI/PEO POLYMER VIA EL ECTROSPINNING AND ITSAPPLICATION AS NH3 GAS S ENSOR ………………………………………………………………………………………No.405
Sisi Li1, 2, Gaofeng Zheng 1, Xiang Wang 1, Yong Chen 2, Dezh i Wu 1, Daoheng Sun 1
1
School of Physics and Mechanical & Electrical Engineering, Xiamen University, China
2
Ecole Normale Superieure, CNRS-ENS-UPMC 8640, France
Higher conductivity of electrospun nanofiber mat was observed by four-terminal resistance measurement compared to polyaniline (PANI)/ Polyethyleneoxide (PEO) film based on the same doping method. In order to improve conductivity of the blended polymer and guarantee its spinability in the
meanwhile, the concentration of PEO with great molecular weight of 5,000,000 could be decreased to 0.10wt%. The influences of voltage,electrode-to-collector distance and flow rate as well as environmental humidity in electrospinning process on the nanofiber morphology were respectively
discussed in detail. PANI/PEO nanofiber mat can be used repeatedly for sensing NH3 gas. The response time is as short as about 6s and it can recover in
6 minutes when exposed to air.

1P1-095

SUPERHYDROPHOB IC S URFACE OB TAINED US ING PYRAMIDAL PTFE FILM FAB RICATED ON RIE ETCHEDSILICON ………………………………………………………………………………………………………………………No.408
Chul-Heu m Baek1, Yao Litao 1, Sung-Bo Seo 1, Hwa-M in Kim1, Dae-Seung Pyo 2, Pyo-Hwan Hong 2, Jung-Hwa Oh 2, Dae-Young
Kong 2, Chan-Seob Cho 3, Jong-Hyun Lee2, In-Yong Eo m4 , and Bonghwan Kim1
1
Department of Electronics Engineering, Catholic University of Daegu, Gyeongbuk, Korea
2
School of Electronics Engineering, Kyungpook National University, Daegu, Korea
3
School of Electrical Engineering, Kyungpook National University, Gyeongbuk, Korea
4
Department of Li fe Chemistry, Catholic University of Daegu, Gyeongbuk, Korea
We have developed a surface texturing process using a polytetrafluoroethylene coating with a pyramidal structure for obtaining superhydrophobic
surfaces. In order to investigate the hydrophobic properties of the surface, we measured the contact angle and roughness values. The calculated roughness77

factor and root mean square roughness ranged from 2.47 to 2.6 and from 0.25 μm to 0.4 μm, respectively. The contact angle of a water droplet on thesurface was greater than 150°; moreover, this angle was maintained for over 7 weeks. This observation implies that extremely low wettability isachievable on superhydrophobic surfaces.

1P1-096FABRICATION AND CHARACTERIZATION OF MICRO-STRUCTURED S UPERCAPACITOR WITH NICKEL ON
POROUS COPPER ……………………………………………………………………………………………………………No.413
J.L. Yin , Y.J. Lee, J.Y. Park
Department of Electronic Engineering, Kwangwoon University, Korea
This paper reports the fabrication method and characteristics of a three dimensional micro interdigital structured supercapacitor. The proposed capacitor
was fabricated by using two porous Cu/Ni electrodes with ultra-high surface area. The porous electrodes were formed by using a negative photoresist
KMPR for high aspect ratio structure and electroplating technique. The electrochemical performances of the fabricated supercapacitor were examined in
1M KOH solution by using the cyclic voltammetric (CV), chronopotentiometric (CP), and electrochemical impedance spectroscopic (EIS) techniques. It
demonstrated the pseudocapacitive and stable charge/discharge behavior. A high specific capacitance of 201 mF/cm2, a power density of 5.06 mW/cm2,
and low series resistance of 2.5Ω were obtained.

1P1-097

A TRANSFER TECHNIQUE OF STRESS S ENSORS FOR VERSATILE APPLICATIONS …………………………No.418
C. Dou, H. Yang, Y. Wu, X. Li, Y. Wang
State Key Laboratory of Transducer Technology, Shanghai Institute of Microsystem and Information Technology, Chinese Academyof Sciences, Shanghai, China.

This paper reports a transfer process of silicon stress and Pt temperature sensors for versatile requirements. Based on a 3μm thick BCB adhesive layer, a
1.6 mm × 1.6 mm donor chip with stress and temperature sensors, which are fabricated on the silicon-on-insulator wafer using standard M EM S process,is bonded on a target wafer. After the bottom silicon layer and the insulator SiO 2 layer of the donor chip are etched by XeF2 gas and RIE technique, only
about 0.2μm thick top sensor layer and 0.7μm thick aluminum layer used as conducting wires and pads are transferred onto the target wafer for themeasurement of its in-plane stresses. Through the transfer process of stress and temperature sensors, the in-plane stresses of the target wafer caused by
the fabrication processes or the package processes can be measured.

1P1-098

DEVELOPING RNA APTAMER NANOPARTICLES AS DRUG CANDIDATES TARGETING GLUTAMATE ION
CHANNELS ……………………………………………………………………………………………………………………No.603
Zhen Huang, Li Niu
Department of Chemistry, the RNA Institute, and the Center for Neuroscience Research, State University of New York (SUNY) at
Albany, Albany, New York 12222, USAIn finding new therapy for some neurological diseases, such as epilepsy, stroke and amyotrophic lateral sclerosis (ALS), one potential therapeutic strategy
is to develop inhibitors for the α-amino-3-hydroxy-5-methyl-4-isoxazole propionic acid (AMPA) receptors, a subtype of the glutamate ion channel
receptors. This is because excessive activity of AMPA receptors leads to abnormal calcium influx into neurons, which in turn leads to cell death. In
developing AMPA receptor inhibitors that are both potent and water soluble, we have used systematic evolution of ligands by exponential enrichment(SELEX) and successfully identified three classes of aptamers with nanomolar potency. To turn them into potentially useful drugs, we are loading these
RNA aptamer molecules onto specialized gold nanoparticles (AuNPs) to facilitate aptamer delivery, its absorption and distribution in vivo.

1P1-099

MICRO-CHAIN MODEL OF MAGNETORHEOLOGICAL FLUIDS B ETWEEN TWO PARALLEL DIS KS ………No.604
Jin Huang, Yan Yang
College of Mechanical Engineering, Chongqing University of Technology, Chongqing, China
Digitai holographic microscopy is presented in this study, which can measure the M agnetorheological fluids (MRF) in different volume percentage ofparticles and different magnetic field strengths. Based on the chain structure of magnetic particle under applied magnetic field, the relationships between
shear yield stress, magnetic field, size and volume percentage of M RF in two parallel planes can be established. It has important theoretical significancefor the design of optimized parameters and the manufacture of MRF. The results show the yield stress is directly proportional to the volume fraction andthe magnetization of particles in the MRF. The theoretical model for yield stress of MRF is established and the variation tendency of shear strength in
MRF with different material composition can be predicted by this theoretical model.

1P1-100

NUMERICAL ANALYS IS OF CHARACTERIS TIC OF GAS FILM B ETWEEN SPIRAL-GROOVED DRY GAS S EAL
FACES AT SLOW SPEED ……………………………………………………………………………………………………No.605
Xu Jin,Peng Xudong, Bai Shao xian, Meng Xiangkai
College of Mechanical Engineering, Zhejiang University of Technology, China
The paper considering the surface roughness of mechanical seal ring, thermal viscosity effect and gas slippage flow effect, the modified expansion
average Reynolds equation which is in compressible fluid conditions presented based on the theories of both gas polytrophic process and gas lubrication
so as to study the gas film viscosity and seal performance of the S-DGS. The obtained results show along with the increasing of rotational speeds, thesurface roughness can add gas viscosity, increase the bearing capacity and stability, reduce leakage quantity; in contrast, slippage flow effect weaken thegas viscosity and recedes the bearing capacity and stability, increasing the leakage; the influence of surface roughness and gas slippage effect on gas
viscosity and seal performance reduced as the film thickness increased, the gas viscosity and seal performance with film thickness would not be affectedby micro-scale effects when film thickness is greater than 2μm.

78

Poster and Exhibition 2 (P2) : Poster Number 2P1-2P103
13:00-15:00
2P1-001

EII

Day2: Tuesday, April 9, 2013

DES IGN AND FAB RICATION OF VARIAB LE MICROPATTERN FOR FLEXIB LE BACKLIGHT ………………No.420
Y. C. Chen, C. T. Pan, H. C. Wu, F. T. Hsu, P. S. Wang
1
Department of Mechanical and Electro-Mechanical Engineering, National Sun Yat-Sen University, Kaohsiung 80424, Taiwan
2
National Science Council Core Facilities Laboratory for Nano-Science and Nano-Technology in Kaohsiung-Pingtung Area,
Center for Nanoscience and Nanotechnology, National Sun Yat-Sen University, Kaohsiung 80424, Taiwan
The effect of variable micropattern for an advanced compound optical film was investigated. This compound optical film was made by using
Lithographie galvanoformung abformung (LIGA)-like process. The multi-step electroforming with micro-void embedded Polydimethylsiloxane (PDM S)
was developed. This work presents many innovative processes, such as the homemade gray scale mask to fabricate variable size array; the multi-step
electroforming process to fabricate various fill-factor from high to low and from low to high; and the embedded micro-void to fabricate optical film
without substrate that avoids total internal reflection. FRED is a commercial software for optical simulation and design. The diffusion of the micro-voidarray and light guide of the variable size microlens array were discussed. Experimental results show that the variable size microlens array with embedded
micro-void can be packaged flexible on side light emitting diode (LED) to improve its lighting uniformity and the light extraction efficiency.

2P1-002

VIBRATION DAMPING PROPERTIES OF GRADIENT INTERPENETRATING POLYMER NETWORKS COMPOS ED
OF POLUUR ETHANE AND VINYL ESTER RES IN…………………………………………………………………………No.422
D.Y. Tang, Z.Q. Yu ,Y. D. Guo, L.L. Liu
Department of Chemistry, Harbin Institute of Technology, China
Gradient interpenetrating polymer networks (IPNs) with the component sequences of polyurethane(PU) and vinyl ester resin(VER) of
60/40~70/30~80/20 and 70/30~80/20~90/10,cured at room temperature, were synthesized. The effects of time intervals and component sequences ofgradient IPNs on their damping properties were studied by Dynamic M echanical Analyzer (DMA). The maximum damping loss factors (tand) and thepeak times of tand≥0.3 in tand~T curves of different gradient IPNs were calculated and compared quantitatively. The extensional gradient IPNs was
prepared at steel sheet with thickness of 1mm and the vibration damping properties were measured by the cantilever method with steel sheet as substrate
and the gradient IPNs as coatings. The effects of the thickness ratio of the IPNs coatings and the substrate, the component sequences of the gradient IPNs
on the structural loss factor (h) of the extensional damping structure at different resonance frequencies were studied.

2P1-003

MECHANICAL S TAB ILITY ANALYS IS OF ORGANIC THIN FILM TRANS ISTORS CONS IDERING INTERFACIAL
DELAMINATION ………………………………………………………………………………………………………………No.433
Zhoulong Xu, Bo Tao, Liu Zun xu
State Key Laboratory of Digital Manufacturing Equipment and Technology, School of Mechanical Science and Engineering,
Huazhong University of Science and Technology, China
It is shown that the organic thin film transistor (OTFT) device’s failure during bending test is related with the interfacial delamination of the
top-electrode in some recent studies. However,the mechanism of the OTFT interfacial crack occurrence is still not clear. Aiming at this problem, theOTFT interfacial crack of the top-electrodes in pure bending is studied and discussed using the finite element analysis, based on VCCT with dummy
nodes in this paper. It is found that the edges of top-electrode, especially the channel side edges, have the maximal possibility to produce interfacial crack
based on the peel and shear stress distributions in multilayer structure. The effect factors, such as the top-electrode thickness, material properties andsubstrate thickness, have also been considered in the discussion. It is shown that the thinner and tender source/drain electrode as well as the thinnersubstrate will help to improving the OTFT reliability.

2P1-004

MICROMACHINED INDUCTOR INTEGRATED WITH A PATTERNED SOFT MAGNETIC THIN FILM ………No.477
Yu -Che Huang 1, Ben-Hwa Jang 2, and Weileun Fang 1,2
1
Department of Power Mechanical Engineering
2
Institute of NanoEngineering and Microsystems, National Tsing Hua University, Hsinchu, Taiwan
This study demonstrates a novel design and fabrication process to realize micromachined inductor integrated with the patterned soft magnetic film
(CoFeB). In order to enhance inductor’s inductance and find out the major design parameters, three types of the inductor integrated with the patterned
soft magnetic film was designed, fabricated and tested. The spiral type inductor was fabricated by copper electroplating. This novel approach to integrate
inductor with soft magnetic thin film by depositing the nitride film dielectric layer for increasing the inductance. As a result, the influence of the soft
magnetic film contributes 10 % increase in the inductance on "magnetic film aligned" inductor at 2 GHz.

2P1-005

DRUG-LOADED CUB IC MICRO-CHAMB ER MADE OF A B IODEGRADAB LE POLYMER FOR BACTERIA-B AS ED
DRUG DELIV ERY ………………………………………………………………………………………………………………No.498
Hyung Jung Yoo, Sang min Lee, Jae Hyun Ahn and Dong-il “Dan” Cho

79

ASRI/ISRC and Department of Electrical Engineering and Computer Science, Seoul National University, Seoul, Korea
In this paper, a novel method of fabricating a drug-loaded, cubic micro-chamber made of biodegradable polymer for bacteria-based drug delivery ispresented. A biodegradable polymer, poly-capro-lactone (PCL), is used to fabricate the micro-structure. The biocompatibility of PCL is approved by the
Food and Drug Administration in U.S. for use in humans. To fabricate the drug-loaded cubic micro-chamber, laminated PCL films are prepared, and adrug is encapsulated between the films using the inkjet printing method. Generally, PCL cannot easy be micromachined by a conventional
photolithography technique. Therefore, an x-ray lithography process is developed to fabricate the cubic structure. The fabrication results indicate that the
proposed method is excellent for microfabricating drug-loaded cubic micro-chambers made of the biodegradable PCL for bacteria-based drug delivery.

2P1-006

A NEW PZT MICROPUMP FAB RICATED FOR CONVEYING FLUIDS ………………………………………………No.516
Xiao-Xiao Yan, Jing-Quan Liu, Bin Yang, Chun-Sheng Yang
National Key Laboratory of Science and Technology on Nano/Micro Fabrication, Shanghai Jiao Tong University，Shanghai, China
In this paper, we designed and fabricated a new PZT micropump that could pump into and pump out fluids. This pump is consist of two parts: one
chamber and two channels. Its mass and size are 1g and 10×10×1 mm respective. It can control tiny fluid movement per minutes. This device can connect
hollow microneedles and be employed to deliver drugs. It also can be used as a micro-flow controller.

2P1-007

SF6 PLAS MA ETCHING AND PROFILE EVOLUTION OF S ILICON IN MICROPLAS MA REACTOR ……………No.521
Wang Hai1,2, Li Han 1,2 , Zhou Xuan 1,2, Wang Zhan 1,2, Wen Li3
1
School of Mechanical and Automotive Engineering, Anhui Polytechnic University, China
2
Anhui Key Laboratory of Advanced Numerical Control& Servo Technology, China
3
Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, China
M icroplasma has been applied widely in microand nano-device fabrication. The etching performance and profile evolution are crucial for realization of
Scanning Plasma Etching (SPE). In this work, silicon etching in SPE with microplasma reactor will be discussed through multi-fluid plasma model
integrated with Monte Carlo model. The relationship between etching rate and tip-sample distance is discussed. The evolution of etched silicon profile isalso investigated through simulation of feature diameter and etching depth with the time. The result of simulation will provide a foundation for
optimization of operative conditions of SPE.

2P1-008

BILAYER WIRE-GRID POLARIZERS FOR DUV TO IR FABRICATED US ING EUV INTERFERENCE AND
NANOIMPRINT LITHOGRAPHY …………………………………………………………………………………………No.532
Li Wang 1, Helmut Schift1, Per Magnus Kristiansen 2, Konstantins Jefimovs 4, Harun H. Solak3,Jens Gobrecht1 and Yasin Ekinci1
1
Laboratory for Micro- and Nanotechnology, Paul Scherrer Institut, 5232 Villigen PSI, Switzerland
2
Institut of Polymer Nanotechnology, University of Applied Science and Arts FHNW, 5210, Windisch, Switzerland
3
Eulitha AG, 5232 Villigen PSI, Switzerland
4
EMPA, Duebendorf, Switzerland
We present the design of a bilayer metallic wire-grid polarizer (WGP) optimized for operation in the deep-ultraviolet (DUV) region, and theirhigh-throughput fabrication of over large areas by nanoimprint lithography (NIL). The master imprint stamps were fabricated using our newly developed
scanning exposure strategy with extreme ultraviolet interference lithography (EUV-IL). Optical measurements show that the fabricated bi-layer polarizer
covers a broad spectral range, starting from wavelength of 280 nm. TM transmission of 50%, and an extinction ratio of 20 dB (102) were realized.

2P1-009

SILICON WAFER MODIFICATION B Y LAS ER INTERFER ENCE …………………………………………………No.543
L. Zhao 1, 2, Z. Wang 1, 2, D. Wang 1, 2, Z. Zhang 1, Y. Yu 1, Z. Weng 1, C. Maple1, 2, D. Li1, 2 and Y. Yue1, 2
1JR3CN & CNM Centres, Changchun University of Science and Technology, China
2
JR3CN & Department of Computer Science and Technology, University of Bedfordshire, UKThis paper presents the study of silicon wafer modification by two-beam laser interference. In the work, two-beam laser interference was used to patternsingle crystal silicon wafers for the fabrication of gratings, and different laser fluences and pulses were applied to the process in the air. The results wereobtained from single laser pulse exposures with the laser fluences of 637mJ/cm2, 780mJ/cm2 and 1280mJ/cm2. The role of multiple laser pulses was also
investigated. In the experiment, the laser wavelength was 1064nm, the pulse duration 7-9ns and the repetition rate 10Hz. The results indicate that thelaser fluence and number of pulses have to be properly selected for the fabrication of gratings using laser interference.

2P1-010AN ELECTROCHEMICAL MICROS ENSOR BAS ED ON MOLYB DOPHOSPHATE COMPLEX FOR FAST
DETERMINATION OF TOTAL PHOSPHORUS IN WATER ……………………………………………………………No.102
Yin Bai1,2 , Jianhua Tong 1, Chao Bian 1, Shanhong Xia1
1
State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing, China
2
University of Chinese Academy of Sciences, Beijing, China
This work mainly describes an electrochemical microsensor based on the reduction of molybdophosphate complex for fast determination of total
phosphorus (TP) in water. Compared with the traditional methods for phosphate detection reported previously that used bulk electrodes, this microsensor
responds faster, and can be applied to TP detection rather than merely phosphate. Calibration of phosphate has been performed with standard solutions
prepared with KH2PO4 with pH adjusted to 1.0. The limit of detection (LOD) is 0.66μmol/L, and linear range is 1～500μmol/L. The sensitivity is -0.657
nA per μmol/L (R2=0.994). Detection of TP was also carried out in digested TP standard solutions, and the results were consistent with the nominal valueof phosphorus concentration.

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2P1-011

DEVELOPMENT OF A PIEZOEL ECTRIC POLYVINYLID ENE FLUORIDE POLYMER-BAS ED S ENSOR PATCH FORSIMULTANEOUS HEARTB EAT AND RESPIRATION MONITORING ………………………………………………No.105
Yi-Yuan Chiu 1,Wan-Ying Lin 2, Hsin-Yao Wang 2, Song-Bin Huang 1 , M in-Hsien Wu 1
1
Graduate Institute of Biochemical and Biomedical Engineering, Chang Gung University, Taoyuan, Taiwan
2School of Medicine, Chang Gung University, Taoyuan, Taiwan
This study reports a piezoelectric polyvinylidene fluoride (PVDF) polymer-based sensor patch for simultaneous heartbeat and respiration detections. The
principle is based on the piezoelectric sensing mechanism to detect the pulsatile vibrations, and periodical deformations on the chest wall of human bodyduring heartbeats and respirations, respectively. In this study, the sensor patch with a structurally curved PVDF film was designed, and fabricated.The
role of the curved structure designed to enhance detection signals, and the capability of the sensor to faithfully detect the heartbeats and respirations wereexperimentally evaluated. Results revealed that the sensor was proved to be able to generate the heartbeat and respiration signals which were inconcordance with those based on a commercial electrocardiogram (ECG), and respiratory effort transducer,respectively. As a whole, this study has
developed a PVDF- based sensor patch which was capable of monitoring the heartbeats and respirations with high fidelity. Other distinctive features
include its small size, light weight, ease of use, low cost, and portability. All these make it a promising sensing device to monitor heartbeats andrespirations either in medical centers, or home care units.

2P1-012

HIGH PERFORMANCE OXYGEN S ENSOR UTILIZING ULTRAVIOLET IRRADIATION ASSISTED ZnO NANORODSUNDER LOW OPERATION TEMPERATURE ……………………………………………………………………………No.114
Chen-Shiun Chou, Yung-Chen Wu, and Che-Hsin Lin
Department of Mechanical and Electro-mechanical Engineering, National Sun Yat-sen University, Taiwan
This paper presents a novel ultraviolet (UV) irradiation assisted nanostructured ZnO film for high performance oxygen sensing under a low working
temperature.The UV irradiation greatly increases the number of the excited electrons to attract the high electron negativity molecule of oxygen. The
response for detecting the oxidation gases can be achieved without using the high catalytic temperature. Nanorod ZnO structures with high exposing area
are synthesized on a glass substrate with interdigital sensing electrodes utilizing the developed two-stage sol-gel and hydrothermal processes. An 80 mW
LED with the emission wavelength of 370 nm is then used to enhance the sensing performance of the nanostructured ZnO film. Results indicate that thesensing performance of the nano ZnO oxygen sensor is greatly improved. The oxygen sensor can work at a low temperature of 50°C with the assist of
UV exposure, which is much lower than the working temperature of typical solid state metal oxide sensors of around 350°C. The response of the
UV-assisted ZnO film shows 4.66 times larger than the same film without UV exposure. The method developed in the present study provides a simple
yet high performance method for oxygen sensing under low operation temperature.

2P1-013A MICRO ELECTROCHEMICAL S ENSOR WITH POROUS COPPERCLUS TERS FOR TOTAL NITROGEN
DETERMINATION IN FRES HWATERS ……………………………………………………………………………………No.115
Yang Li1,2 , Jizhou Sun 1, Chao Bian 1, Jianhua Tong 1 and Shanhong Xia1
1
State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences2
Graduate University of Chinese Academy of Sciences, China
A micro electrochemical sensor has been developed for total nitrogen (TN) determination in freshwaters. After the digestion process of water samples,
nitrate was detected with the microsensor modified by porous copper-clusters and the concentration of TN was calculated by a portable electrochemicalsystem. As the electrocatalyst material, copper was electrodeposited onto the working-electrode of the microsensor by cyclic voltammetry (CV) method
and square-wave pulsating current (PC) method. It was found that copper layer fabricated by PC method was open porous and performed higher
sensitivity in nitrate detection than that fabricated by CV method. Calibration in digested samples showed that microsensors modified by PC method hadsensitivity of 7.3104 μA/mgL-1 and limit of detection (LOD) of 0.1 mg/L for TN determination. Concentrations of TN in 7 samples from lakes and rivers
were detected using the portable electrochemical system. The results were in agreement with the data obtained by standard TN measurement method.

1P1-014

SOL-GEL FIB ER-OPTIC ABSORB ANCE S ENSOR FOR GROUNDWATER CONTAMINANTS ……………………No.119
Gy mama Slaughter and Yi Xin
Department of Computer Science & Electrical Engineering, University of Maryland Baltimore, Baltimore, Maryland, USA

An evanescent wave fiber optic sensor for the detection of groundwater contaminants is developed. A 62.5 μm fiber core, 15 mm in length, waschemically etched and coated with 20 μm porous silica medium using sol-gel dip-coating method. This lower-refractive index medium causes the lightbeam to be transmitted by total reflection and the resulting evanescent wave produces a net flow of energy across the reflecting surface in the surrounding
medium where it interacts with the surrounding environment. The power intensity of the solgel modified fiber is measured in the 1540 to 1600 nm
spectral range. Various amounts of pure hexane and ethanol were used to examine the response of the sensor. A remarkable influence of the absorption of
the evanescent waves in the sol-gel modified fiber for hexane and ethanol was observed.

2P1-015

MEAS UREMENT OF INTERNAL TEMPERATURE, FLOW AND PRESS URE IN MICRO-MET HANOL-REFORMERUS ING MULTIFUNCTION MICRO-S ENSORS ……………………………………………………………………………No.123
Chi-Yuan Lee, Ch ia-Chieh Shen, Yu-M ing Chang, Fan-Hsuan Liu
Department of Mechanical Engineering, Yuan Ze Fuel Cell Center, Yuan Ze University, Taoyuan, Taiwan
M ethanol has many advantages, such as safe for storage and transportation and low reforming temperature. M ethanol can be use to provide hydrogen forfuel cell. In this research, the multifunction micro-sensors are integrated using the micro-electro-mechanical systems (M EM S) technology for the in-situ
monitoring of temperature, flow and pressure within micro reformer. The multifunction micro-sensors are embedded inside the micro reformer
successfully and the calibration curves of micro temperature, flow and pressure sensors are finished. In the future, the further temperature, flow andpressure data obtained demonstrate that operation occurred in the micro reformer.

812P1-016

SIMULATION AND DES IGN OF MICRO PRESS URE S ENSORS APPLIED TO MEAS URE THE INTRACRANIALPRESS URE ……………………………………………………………………………………………………………………No.128
Pang Bo, Zhang Zhao-Hua, Ren Tian-Ling
Institute of Microelectronics, Tsinghua University, China
This paper reports a micrometer level pressure sensor to measure the intracranial pressure (ICP). The sensor is based on the piezoresistive effect. The
piezoresistive pressure sensor is simulated and designed by using nonlinear programming Optimizing and FEA tools. The sensor is fabricated by M EM S
process. From tests, the sensor samples performances match up the design.

2P1-017MECHANICAL CHARACTERIZATION OF NANOWIRES B Y PLANAR VIBRATION S ENSOR …………………No.129
L. Zhang, J. Lu , H. Takagi, and R. Maeda
Research Center for Ubiquitous MEMS and Micro Engineering (UMEMSME)
National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Ibaraki, Japan
Nanowires have attracted considerable interest as the nanoscale interconnects and as the moving elements of both electronic and electromechanicaldevices. The evaluation of nanomechanical property plays a significant role in the development of new nanowire-based devices. Recently, we areengaged in developing an easy method for nanomechanical measurement by using an in-plane-mode piezoresistive vibration sensor fabricated with lessprocess cost and package difficulties. Theoretical analysis and simulation results suggested that the device is capable of high-sensitive and variety, and it
is expected to evaluate mechanical properties of metallic or metallic oxide nanowires.

2P1-018

AN ENERGY HARVES TING DEVICE MANUFACTURED US ING THE COMMERCIAL 0.18 mm CMOS PROCESS……………………………………………………………………………………………………………………………………No.130
Ching-Liang Dai, M ing-Zhi Yang, Sh ih-Wen Peng
Department of Mechanical Engineering, National Chung Hsing University, Taichung, 402 Taiwan

This study investigates the fabrication and characterization of an energy harvesting device using the commercial 0.18 μm CM OS (complementary metaloxide semiconductor) process. Based on the thermoelectric method, the energy harvesting device converts thermal energy into electrical power. Theenergy harvesting device is constructed by 408 thermocouples in series, and each thermocouple is composed of p-type and n-type polysilicon strips. In
order to increase the temperature difference in the hot and cold parts of the thermocouples, the hot part of the thermocouples is suspended to reduce heatsink. The experimental results showed that the energy harvesting device had an output voltage of 0.4 mV at the temperature difference of 15 K and an
output power of 125 nW at the temperature difference of 15 K.

2P1-019

PIEZOEL ECTRIC MEMS DEVICES AND ITS APPLICATION AS B IO-CHEMICAL S ENSORS …………………No.145
J. Lu 1, T. Sagawa2, L. Zhang 1, H. Takagi1 , D.F. Wang 2, T. Itoh 1, R. Maeda1
1
Research Center for Ubiquitous MEMS and Micro Engineering, AIST, Tsukuba, Ibaraki, 305-8564, Japan2
Department of Mechanical Engineering, Ibaraki University, Hitachi, Ibaraki, 316-8511, JapanMEM S resonator exhibits extraordinary high sensitivity when used as bio-chemical sensor for detecting weight of specimen, adsorption of molecules,
etc. by resonant frequency shift, in which piezoelectric transduction is effective to reduce power consumption for portable applications. However, thesensitivity is deteriorated by piezoelectric film due to its energy dissipation. This paper reviews our recent developed piezoelectric M EM S resonators,
including cantilever actuated by PZT and detected by piezoresistive gauge, beam resonator actuated by PZT and detected by electrostatic sensor,
disk/ring resonator actuated and detected by PZT, for the pursuit of high Q-factor,high resonant frequency, and better device sensitivity. The performanceof each device was evaluated and investigated. The advantageous & weaknesses of above devices were discussed for application as bio-chemical sensors.

2P1-020

A COMPARISON STUDY ON HYDROGEN S ENS ING PERFORMANCE OF Pt/ MoO3 NANOPLATEL ETS COATED
WITH A THIN LAYER OF Ta2O 5 OR La2O3 ………………………………………………………………………………No.154
J. Yu , Y. Liu, F.X. Cai, M. Shafiei, G. Chen, N. Motta, W. Wlodarski, K. Kalantar-zadeh, P.T. Lai
1
Department of Electrical and Electronic Engineering, The University of Hong Kong, Hong Kong
2
School of Chemistry, Physics and Mechanical Engineering, Queensland University of Technology, Australia
3
School of Electrical and Computer Engineering, RMIT University, Australia
In this work, we investigate how hydrogen sensing performance of thermally evaporated MoO3 nanoplatelets can be further improved by RF sputtering athin layer of tantalum oxide (Ta2O5) or lanthanum oxide (La2O3). We show that dissociated hydrogen atoms cause the thin film layer to be polarised,inducing a measurable potential difference greater than that as reported previously. We attribute these observations to the presence of numerous traps in
the thin layer; their states allow a stronger trapping of charge at the Pt-thin film oxide interface as compared to the MoO 3 sensors without the coating.
Under exposure to H2 (10000ppm), the maximum change in dielectric constant is 45.6 (at 260℃) for the Ta2O5/M oO3 nanoplatelets and 31.6 (at 220℃)
for the La2O3/MoO3 nanoplatelets. Subsequently, the max.sensitivity for the Ta2O5/MoO3 and La2O3/M oO3 based sensors is 16.8 and 7.5, respectively.

2P1-021

A TWO-DIMENS IONAL S ILICON-ON-GLASS ACTUATOR WITH DISPENS ED POLYMER MICROLENS ……No.156
Pei Li1 , Long-Fa Pan 1 and Hans Zappe2
1
Department of Precision Instrument, Tsinghua University, China
2
Department of Microsystems Engineering - IMTEK, University of Freiburg, Germany
Significant advances in the technical capabilities of microlens actuators for optical pickups have been achieved using M EM S technology, enabling
miniaturization and integration of optical data storage systems. In this work, a new type of compact silicon-on-glass (SOG) actuator for two-dimensional82

(2-D) positioning of a dispensed polymer microlens is developed by MEM S technology. A wafer-level process for fabrication of the SOG actuator isachieved using anodic bonding of a pyrex wafer and an ultra-thin silicon wafer. Dispensed polymer microlenses are subsequently integrated onto the 2-D
actuator. Typical displacements of about ±28.6μm in tracking direction and 3.2μm in focusing direction are experimentally characterized. The compact
2-D SOG actuator can simplify the assembly and expand the application area for the optical pickup system.

2P1-022FABRICATION OF S ILICON NANOPILLARS ARRAY FOR DEV ELOPING PCs SENSOR ………………………No.170
Mao-Jung Huang 1, Chii-Rong Yang 2, Chien-Ying Su 1 and Ming-Hua Shiao 1
1
Instrument Technology Research Center, National Applied Research Laboratories, Hsinchu,Taiwan
2
Department of Mechatronic Technology, National Taiwan Normal University, Taipei, Taiwan
This study proposed the use of combined nanosphere lithography (NSL) and photo-assisted electrochemical etching (PAECE) to generate arrayednano-pillar with high aspect ratio on silicon wafer, and then used for the application of photonic crystals (PCs) Sensor. The experiment result indicatesthe NSL can conveniently define nano-array and PAECE technique can effectively yield nano-pores and nano-pillars. The nano-pore, depth of 2.3μm anddiameter of 90 nm, was generated by 1 V PAECE. When the bias of PAECE was enlarged to 2.2 V, nano-pillar array was produced with 2 μm in height,
100 nm in diameter and 20:1 for aspect ratio. The PCs sensor detection platform was composed by laser of 1550 nm, precision translation stage andpolarimeter. Through this high sensitive system, we can examine the small bio-molecules of plasmid by means of the polarized variation represented in
Poincarè sphere coordinate system.

2P1-023

A MICROMACHINED MONOLITHIC 3 AXIS ACCELEROMET ER BAS ED ON CONVECTION HEAT TRANSFER……………………………………………………………………………………………………………………………………No.173
Leyue Jiang, Yongyao Cai, Haidong Liu, Yang Zhao
MEMSIC Inc.1 Tech Drive, Suite 325 Andover, MA 01810 , USA
In this paper, a monolithic 3 axis thermal accelerometer has been developed based on standard CMOS process. This 3 axis thermal accelerometer use
exactly the same sensor area and manufacturing process as 2 axis thermal accelerometer reported in the past. It is easy to mass produce and has low cost,small size.

2P1-024

DES IGN OF LC-TYPE PASSIVE WIREL ESS MULTI-PARAMET ER S ENSOR ……………………………………No.175
Cong Zhang, Jian-Qiu Huang, Qing-An Huang
Key Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing, China
This paper presents an innovative design of miniature LC-type passive wireless multi-parameter sensor. The sensor consists of multiple planar inductors
on a single substrate and variable capacitors forming resonant LC tanks with separated resonant frequencies. The multiple parameters of interest could beremotely measured by tracking the changes in the peak frequencies of the impedance phase at an external readout coil which is magnetically coupled tothe sensor. In order to make sure that the discernible peaks can be observed, the partly-overlapped planar embedded inductors in a multi-layer organic
substrate are used and respectively in parallel connected with MEM S variable capacitors. The sensor in this stacking configuration achieves
multi-parameter telemetry without any significant increase in size compared to the previous single parameter counterpart. EM simulation and tentative
experiments both have been carried out, and the results validate the proposed design.

2P1-025

SIMULATION OF THRES HOLD VOLTAGE ADJ USTMENT B Y B+ IMPLANTATION FOR PMOS-RADFETAPPLICATION …………………………………………………………………………………………………………………No.177
Shuaimin Wang 1, 2, Peng Liu 1, Jinwen Zhang 1
1Institute of Microelectronics, Peking University, Beijing, China
2 Shenzhen Graduate School of Peking University, Shenzhen, ChinapMOS-RADFET (radiation field-effect transistor) as micro-dosimeter has been widely applied in spacecraft, medicine and personnel dosimetry. Thickgate-oxide and zero threshold voltage (Vth) are two critical factors to achieve high performance pMOS-RADFET. In this paper, the Vth adjustment
techniques for thick gate oxide by B+ implantation are simulated systematically by Silvaco TCAD, including implanting energy, dose and anneal-ing
conditions. And the impurity distributions both in gate-oxide and silicon substrate are analyzed. The results show that implant-ing energy up to 130keV
and dose as 3.2e11 works well for 388nm gate-oxide. Considering activation and distribution of impurity, both annealing temperature and time has to be
as low and short as possible.

2P1-026

NOVEL FLEXIB LE ROOM TEMPERATURE NO2 GAS S ENSOR BAS ED ON POLYPYRROLE COATED SNO2NANOPARTICLES ……………………………………………………………………………………………………………No.178
Xin Chen 1, Dongmei Li1 , Shengfa Liang 1, Xiaojing Li1, Shuang Zhan 2, Ming Liu 1
1
Key laboratory of Nano-Fabrication and Novel Device Integration, Institute of Microelectronics, CAS, Beijing, China
2
College of Materials Science and Technology, Qing Dao University of Science &Technology, Qingdao, China
In this paper, we demonstrate a novel flexible gas sensor based on polypyrrole (PPy) coated SnO 2 nanoparticles that can be employed to detect low
concentrations of NO2 (0.5 - 5 ppm) at room temperature. This low-cost, easy-fabrication and wearable gas sensor was fabricated on PET substrate. The
sensitive film was formed by first drop casting the solution of SnO2 nanoparticles and FeCl3 on the as patterned interdigital electrodes on PET substrate;then the substrate was exposed to saturated pyrrole vapor for 3h to obtain PPy coated SnO2 sensitive film. Our sensor shows good performance indetecting low concentration NO2 and the estimated detection limit is about 100 ppb at room temperature.

83

2P1-027

FABRICATION OF AN AMMONIA MICROS ENSOR BAS ED ON ZINC OXIDE ……………………………………No.179
Ming-Zhi Yang, Ching-Liang Dai
Department of Mechanical Engineering, National Chung Hsing University, Taichung, Taiwan

The ammonia microsensor is fabricated by the 0.35 μm complementary metal oxide semiconductor (CMOS) process. The sensor is composed of asensitive film and polysilicon electrodes. Area of the ammonia microsensor is about 1 mm2. The sensitive film of the ammonia microsensor is zinc oxide
prepared by hydrothermal method. The sensor requires a wet etching process to remove the sacrificial oxide layer and coats the zinc oxide sensitive filmon the polysilicon electrodes after the CMOS process. The ammonia microsensor is resistive type. When the sensitive film absorbs or desorbs ammonia
gas at room temperature, the sensitive film generates a change in resistance. Experimental results present that the sensitivity of the ammonia microsensor
is about 12.6 Ω/ppm at room temperature.

2P1-028

ZnO NANOPARTICLE AS THE S ENS ING EL EMENT FOR THE LOW-COST ACCELEROMET ERS APPLICATIONS……………………………………………………………………………………………………………………………………No.183
Jun Tang 1,2, Hao Guo 1,2 , Yunbo Shi1 ,2, Huanfei Wen 1,2, Jun Liu 1,2, Chenyang Xue1,2, Wendong Zhang 1,2
1
Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education
2
Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Taiyuan, China
In this research, the ZnO nanoparticles have been used as the strain gauge element, which was applied as the embedded sensing element for the low cost
accelerometers. The resistance, capacitance and impedance responses of the ZnO nanoparticle films to the external strain and acceleration, with different
nanoparticle density and sizes (5nm, 10nm, 20nm) of ZnO nanoparticle were systematically studied. The maximum capacitance sensitivity ofaccelerometer can be up to 0.484 pF/g. The linearity is up from 99.219% to 99.549% as the densities increase. This research result showed that ZnO
nanoparticles have the potential applications as the sensitive unit to develop the low cost and high sensitivity accelerometer in the future.

2P1-029

A HIGH S ENS ITIVITY MICROMACHINED ACCEL EROMET ER WITH AN ENHANCED INERTIAL MASS SOI MEMSPROCESS ………………………………………………………………………………………………………………………No.202
XIE Jianbing 1, 2 , SONG Meng 1, 2, YUAN Weizheng 1, 2
1
Micro and Nano Electromechanical Systems Laboratory, Northwestern Polytechnical University, Xi’an, China
2
Key Laboratory of Micro/Nano Systems for Aerospace, Ministry of Education, Xi’an, China
This paper provides an enhanced inertial mass SOI MEM S process for the fabrication of a high sensitivity micromachined accelerometer. In the proposed
process, the handle layer of the SOI wafer is used as an enhanced inertial mass, in this way, the inertial mass of the accelerometer can increase 5-15
times. Therefore, the sensitivity of the M EM S accelerometer can be significantly increased. In this paper, an in-plane single-axis accelerometer isdesigned firstly. And then, the accelerometer is fabricated in a low resistivity SOI wafer with 60μm thickness device layer and 400μm thickness handle
layer through the developed enhanced inertial mass SOI M EM S process. The sensitivity of the fabricated MEM S accelerometer is 2.257V/g, the linearityof output is within 0.5%, and the power spectral density of the noises is as low as 6.79μV/ Hz .

2P1-030

A Si-GLASS BAS ED PRESS URE S ENSOR WITH A SINGLE PIEZORES ISTIVE EL EMENT FOR HARS HENVIRONMENT APPLICATIONS …………………………………………………………………………………………No.205
Hong Zhang 1,2, Huiming Xu 1,2 , Yan Li1 ,2, Zijun Song 1,2, Haisheng San 2, Yu xi Yu 3
1
School of Physical and Mechanical & Electrical Engineering, Xiamen University, Xiamen, China
2
Pen-Tung Sah Institute of Micro-Nano Science and technology, Xiamen University, Xiamen, China
3
Fujian Key Laboratory of Advanced Materials, Department of Materials Science and Engineering, Xiamen University,, China
A Si-Glass based MEM S piezoresistive pressure sensor is designed for harsh environment applications, such as vibration, shock and environment
conditions with humidity, alkalescence or acidity, electrostatic particles and so on. The sensor chips were fabricated using SOI wafer-glass anodic
bonding technology, which enables a single boron-implanted piezoresistor to be on lower surface of silicon diaphragm and be vacuum-sealed in glass
cavity. The sensing signals were led out by using the embedded Al electrode structure at the bonding interface of Si-glass to connect single piezoresistor,
and two large-area Ni-Au pads are used to electrically connect to the print circuit board (PCB) by using the drag soldering technology instead of gold
wire bonding. The characteristics of voltage-pressure were measured with constant current under different temperature conditions. A temperaturecompensation technology is used to calibrate the measured results, by which the sensitivity of 116 mV/ (mA•MPa) and accuracy of 5.8% F.S. are
obtained.

2P1-031

PHOTOCATALYTIC MICROREACTORS FOR WATER PURIFICATION: S ELECTIV E CONTROL OF OXIDATIONPATHWAYS …………………………………………………………………………………………………………………No.212
Ning Wang, Ngai Yu i Chan, Chap Hang To, Furu i Tan, Xu ming Zhang
Department of Applied Physics, Hong Kong Polytechnic University, Hong Kong
This paper analyzes the different reaction pathways that play major roles in the process of photocatalytic degradation, and presents a novel microfluidic
photoelectrocatalytic reactor for selective control of them. This is accomplished by applying positive or negative bias potential to the photocatalytic
reaction chamber and to select either the hole-driven or electron-driven oxidation pathway. The experimental results show that the negative bias exhibits
higher performance in degrading the model chemical of methylene blue. Such selective control brings several important benefits. It provides another
degree of freedom for photocatalysis, and enables detailed kinetic study on the reaction mechanisms. And, the bias eliminates the electron/hole
recombination, which is one of the fundamental limits in conventional photocatalytic systems. In additional, the experiment shows that the bias produces
a synergetic effect of electrocatalysis and photocatalysis and significantly enhances the degradation efficiency. The photoelectrocatalytic microreactor
shows high stability and may be scaled up for high-performance water purification.

84

2P1-032

EL ECTROSPUN NICKEL OXIDE NANOFIB ERS FOR GAS S ENSOR APPLICATION ……………………………No.216
Haiyan Liu, Xiang Wang, Guangqi He, Yihong Lin, Jin Wei, Jianyi Zheng, Gao feng Zheng, Daoheng Sun
Department of Mechanical and Electrical Engineering, Xiamen University, China
Oxide gas sensor based on electrospun nanofibers were fabricated and studied in this paper. Polyvinyl pyrrolidone (PVP)/Nickel acetate precursor
nanofibers were electrospun, which were sintered into Nickel oxide (NiO) nanofibers with diameter in the range of 100 to 400 nm. The morphology andstructure of NiO nanofiber were characterized by scanning electron microscopy and X-ray diffraction. The Gas sensing properties (C3H6O,C2H5OH andNH3) of NiO nanofibers were also investigated. The NiO nanofibers exhibited rapid response/recovery sensitivity with all the three target gases at room
temperature. The response/recovery time of electrospun NiO nanofiber gas sensor for C3H6O, C2H5OH and NH3 were 4/5.5s, 2.5/2s and 16/5s; and thesensitivity were 11.0, 15.9 and 72.3, respectively. These results suggest that the electrospun NiO nanofibers are promising for gas sensor applications.

2P1-033

INFLUENCE OF S UBSTRATE S URFACE ROUGHNESS ON THE PROPERTIES OF A PLANAR-TYPE CO2 S ENSORUS ING EVAPORATED Li 3PO 4 FILM ………………………………………………………………………………………No.220
Hairong Wang, Peng Li, Guo liang Sun, Zhuangde Jiang
State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi’an Jiaotong University, China
Planar-type potentiometric CO2 gas sensors using thermal evaporated Li3PO4 thin film as the solid electrolyte were fabricated. Al2O3 plates with roughand smooth surfaces were used as the substrates of the sensors. X-ray diffraction analysis, atomic force microscope and scanning electron microscopewere used to characterize the Li3PO4 films. The sensing properties were investigated in the range of 500~5000 ppm CO2 concentrations at 480 °C. Boththe rough substrate sensor (r-sensor) and the smooth substrate sensor (s-sensor) showed a good Nernst behavior. The output EMF of s-sensor showed amore stable signal than the r-senor. Response and recovery times of the r-sensor were 40 s and 75 s, and for the s-sensor they were 35 s and 60 s. The
ΔEMF/decade values obtained from the r-sensor and s-sensor were 45 mV/decade and 55 mV/decade, respectively. It can be found that the Nernst’s slopof the s-sensor was closer to the theoretically value. The results revealed that the substrate surface roughness may influence the characteristics of Li3PO4
film and the response properties of the sensors to CO2.

2P1-034

MULTI-CHANNEL MICROEL ECTRODE ARRAY FOR CORTICAL RECORDING AND STIMULATION:FABRICATION AND MODIFICATION ……………………………………………………………………………………No.225
Sanyuan Chen, Weihua Pei, Qiang Gui, Yuanfang Chen, Shanshan Zhao, Hongda Chen
State Key Laboratory of Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing, China
The fabrication of silicon-substrate multi-channel microelectrode arrays for single neuron recording as well as modification of two materials to optimize
the neural tissue-electrode interface were investigated. By use of multi-project wafer (MPW) model, six kinds of microelectrode arrays with different
recording sites arrangement were simultaneously fabricated from one 4-inch wafer. To improve electric characteristic and biocompatibility, conducting
polymer poly(3,4-ethylenedioxythiophene) (PEDOT) and multi-wall carbon nanotube (MWCNT) were used to modify the surface of microelectrode. The
modified microelectrode exhibited better electrochemical characteristics, including a particularly high safe charge injection limit and low electrode
impedance, as well as high signal-to-noise ratio in vivo. All of these characteristics are desirable for an implantable neural microelectrode and themodification method can be widely used to modify other neural interface devices.

2P1-035COMPRESSIVE S ENS ING OF NEURAL ACTION POTENTIALS US ING NANO PLATINUM B LACK MODIFIEDMICROEL ECTRODE ARRAY ………………………………………………………………………………………………No.240
Shuai Zhou 1, 3 ,Bingchen Zhang 2, Shengwei Xu 1, M ixia Wang 1 , Bo wei Dai1, Wen Hong 2, Yirong Wu 2, Xin xia Cai1, 3
1State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Science, Beijing, China
2
Science and Technology on Microwave Imagine Laboratory, Institute of Electronics, Chinese Academy of Science, Beijing, China
3
University of Chinese Academy of Sciences, Beijing, China
Long-term wireless neural recording systems which are subject to stringent power consumption, are highly desired to reduce the rate of data transmission
and computation complexity. In this paper, we propose using a combination of on-chip neural action potentials (‘spikes’) detection system andcompressive sensing (CS) techniques to reduce the power required for data transmission and a random Bernoulli matrix to reduce the computation
complexity consequently further reduce the power consumption. By analyzing the data detected by nano platinum black modified microelectrode array
implanted in the hippocampus of the Sprague-Dawley (SD) rat, we prove that spikes are compressible in the wavelet domain. We use the Bayesian CS
algorithm to reconstruct them. Our results show that the mean compression ratio is 26:1 achieved for 16-dB SNDR recovery using this mechanism.

2P1-036

A NOVEL PLANAR MICROEL ECTRODE ARRAY FAB RICATED FOR B RAIN SLICEEL ECTROPHYS IOLOGY ………………………………………………………………………………………………………No.241
Tingjun Jiang 1, 2, Chunxiu Liu 1, Shengwei Xu 1, Yilin Song 1, Nansen Lin 1, Wentao Shi1, Xin xia Cai1, 2
1State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, China
2
University of Chinese Academy of Sciences, China
To provide an effective and widely applicable tool for electrophysiological experiments of acute hippocampal slices, a novel planar microelectrode array(pMEA) was fabricated by standard photolithography technology. The novel pM EA has a special distribution of microelectrodes, with the nano-structureinterfaces, the low impedance and superior signal-to-noise ratio characteristics. It could be directly applied to the electro-physiological experiments fordifferent regions of acute hippo-campal slices from rat brains. The electrophysiological signals from the CA3 and CA1 regions of an acute hippocampal
slice were successfully recorded by the novel pMEA in this article.

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2P1-037

EL ECTRICAL PROPERTIES OF MICRO-HEATERS US ING SPUTTER ED NiCr THIN FILM ……………………No.254
Ting-Ting Wu 1,2,Jing-Quan Liu 1,2, Shui-Dong Jiang 1, 2,Bin Xu 1, 2,Bin Yang 1, 2,Hong-Ying Zhu 1, 2,Chun-Sheng Yang 1, 2
1
Science and Technology on Micro/Nano Fabrication Laboratory, Shanghai, China
2
Institute of Mico and Nano science and Technology, Shanghai Jiao Tong University, Shanghai, China
NiCr (80/20 at.%) thin films were deposited on SiO2/Si substrates as a cryonetic heater by DC magnetron sputtering technique. After a series of annealing
treatments under various conditions, the electrical properties and microstructure of the films were investigated. The crystallinity and composition of thefilms were analyzed by X-ray diffraction (XRD) and scanning electron microscopy (SEM ). The films are changed from crystalline to amorphous phase
after annealing at 250 ℃ in nitrogen ambient and the annealing conditions have a significant effect on the resistivity and temperature coefficient ofresistance（TCR）of the films. TCR of the samples annealed at 250 ℃ for 9 minutes in N2 shows 9.23 ppm/K at 20K which is finally confirmed as the
optimal result.

2P1-038A DUAL MODE NEURAL S IGNAL RECORDING S YS TEM FOR S YNCHRONOUS NEUROEL ETRICAL AND
NEUROCHEMICAL DET ECTION …………………………………………………………………………………………No.255
Shengwei Xu 1, Nansen Lin 1, Dalei Wang 2, Wenjing Yu 1,3 , Wentao Shi1, Tingjun Jiang 1,3, Xin xia Cai1,31State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing, China
2Center for Molecular Science, Institute of Chemistry, Chinese Academy of Sciences,Beijing, China
3
University of Chinese Academy of Sciences, Beijing, China
This paper presents a 64-channel Dual M ode Neural Signal Recording System (DMNSRS) for detection of neuroeletrical and neurochemical signals. The
DMNSRS comprises neurochemical recording module with current resolution of 1 pA and neuroelectricity recording module with voltage resolution of
0.3 μV. The two modules can work synchronously without mutual interference. In a global cerebral ischemia experiment, using M ulti-Electrode Arrays(M EA) as neurobiological electrode and a single-walled carbon nanotube (SWNT)-modified glassy carbon electrode as neurochemical working
electrode, the neuroelectrical and neurochemical signals are synchronously recorded by the DMNSRS in the Sprague-Dawley (SD) rat cortex.

2P1-039MAGNETICALLY ACTUATED RES ONANT PIEZORES IS TIVE MICROCANTILEVER OPERATING IN FLUID FOR
DC CURRENT MEAS UREMENT ……………………………………………………………………………………………No.260
Gu iming Zhang 1, Libo Zhao 1, Zhuangde Jiang 1, Longqi Xu 1 , Yu long Zhao 1, Xiaopo Wang 2, Zhigang Liu 2
1State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an, China
2
Key Laboratory of Thermo-Fluid Science and Engineering of Ministry of Education, Xi’an Jiaotong University, Xi’an, China
A novel dc current sensor based on magnetically actuated resonant piezoresistive microcantilever is proposed. The sensor measures the dc current bydetecting the shift of resonant frequency of the microcantilever. A detailed theoretical study on the relationship between the current and the cantilever’s
resonant frequency is also given. To reduce force and displacement noise, the microcantilever works in the fluid with good thermal conductivity. The
experimental results show that the sensor can achieve a sub-milliampere resolution and the accuracy is found to be 3.93% for the current of 0.5 to 5 mA.

2P1-040FABRICATION AND CHARACTERIZATION OF A NOVEL MULTI-ANNULAR TYPE B ACKS CATTER ED
EL ECTRON DETECTOR FOR S EM ………………………………………………………………………………………No.265
Yun-Ju Chuang 1, Pei-Ru Chen 1, Wei-Rui Lin 2 and Fu -Ron Chen 2
1
Department of Biomedical Engineering, Ming Chuan University, Taoyuan, Taiwan
2
Department of Engineering and System Science, National Tsing Hua University, Hsinchu, Taiwan
A novel silicon PIN diodes for detecting backscattering electrons in SEM was proposed and fabricated. The multi-annular configuration enables toprovide better surface topography contrast of BSE image compared with traditional quadratic configuration. In this study, the multi-annular backscatteredelectron detector (BSED) can provide surface topography contrast of 82.11 nA/μm, which is 105% increase as compared with commercial BSED.
Besides, the multi-annular detector has lower threshold detective energy of 1.28 keV and wide detective dynamic range (up to 30 keV). It is demonstrated
that the multi-annular BSE detector is well suited for imaging in SEM system.

2P1-041

AN INTERFACE AS IC OF QUARTZ VIB RATORY GYROSCOPE WITH 0.8°/ HOUR ROOT ALLAN
VARIANCE ………………………………………………………………………………………………………………………No.266
Qingyi Wang, Weiping Chen, Liang Yin, Xiaowei Liu, He Zhang
MEMS Center, Harbin Institute of Technology, Harbin, Heilongjiang, China
This paper analyzed the factor of bias drift of quartz vibratory gyroscope, proposed improving bias stability of quartz vibratory gyroscope and designed
an interface ASIC of quartz vibratory gyroscope. The bias instability is generated by characteristic of noise in the detecting circuit and the quantity of thedriving single in the exciting circuit. We propose a sine-wave exciting circuit which has lower phase noise than the traditional exciting approach. An
operational amplifier with low noise and offset voltage temperature coefficient is designed to decrease the bias instability. The interface ASIC integrated
on a 5×4.4mm2 chip with 0.5μm CMOS process has 40mW power supply, 18nV/Hz1/2 equivalent input noise density, and 0.8°/hour root Allan variance.

2P1-042A MULTI-CHANNEL TES T S YSTEM FOR CALIBRATION OF MEMS B AROMETRIC PRESS URE S ENSORS …No.271
Lou Wenzhong , Ding Xuran, Hong Rongsen
State Key Laboratory of Mechatronics Engineering and Control, Beijing Institute of Technology, China
For the advantages of small volume, low power consumption and high accuracy, M EM S sensors have been widely used in many fields, especially for86high altitude meteorology monitoring, where a radiosonde with M EM S barometric pressure sensors will be used to collect the data of barometricpressure. Therefore, the way to calibrate such MEM S sensors effectively is of a great value. This paper reported a method for calibration of multiple stateof the art M EM S barometric pressure sensors simultaneously based on an innovative test system. With this system, at most eight sensors can becalibrated in a same time. A test by utilizing BM P085 has been implemented, and the results showed that the system was reliable and effective.

2P1-043

RES EARCH ON THE STRUCTURE OF ULTRATHIN Si PIN DET ECTOR ……………………………………………No.311
Peiquan Wang , Dayu Tian, Shaonan Wang, Min Yu, Yufeng Jin
National Key Laboratory of Nano/Micro Fabrication Technology, Institute of Microelectronics, Peking University, Beijing, China
Ultrathin PIN Detectors have been applied in radiation detection for particle identification and etc. In this paper, we present simulation research on the
structure of ultrathin Si PIN detector based on bonding technology by using Sentaurus TCAD tool. The normal structure and reverse structure of ultrathin
Si PIN detector are simulated and compared. The reverse current of detector and electrical field distribution are analyzed. It is found that the reverse
current of the reverse structure increases fast when the voltage exceeds a threshold value. It is explained by considering the parasitic M OS structure. Thiseffect can be reduced by increasing the thickness of buried SiO2.

2P1-044

COMPACT MULTI-LAYER MAGNETIC S HIELDS FOR CHIP-SCALE ATOMIC DEVICES ………………………No.318
L. Xuan, H. Dong, C. Zhuo
School of Instrumentation Science and Opto-electronics Engineering, Beihang University, Beijing, China
Science and Technology on Inertial Laboratory, Beijing, China
Fundamental Science on Novel Inertial Instrument & Navigation System Technology Laboratory, Beijing, China
We have designed four sets of multi-layer nested magnetic shields. External diameters for the individual shielding layers range from 3.3cm to 5.3cm. The
four sets of magnetic shields are tested by fluxgate magnetometer separately. The result of experiment is in excellent agreement with theoretical
calculations. The four sets of multi-layer compact magnetic shields made of high-permeability material are compared. The largest shielding factor
measured was 32.3 dB for a nested set of three cylinders (Set 2). The nested two spheres structure (Set 4) has the largest uniform region (12mm). The
nested one shell of sphere and one cylinder shell (Set 3) achieve the best trade-off between uniform region and shielding factor.

2P1-045

THREE DIMENS IONAL COMPENS ATION SPHERICAL COILS FOR COMPACT ATOMICMAGNETOMET ERS ……………………………………………………………………………………………………………No.320
C. Zhuo, H. Dong, L. Xuan
School of Instrumentation Science and Opto-electronics Engineering, Beihang University, Beijing, China
Science and Technology on Inertial Laboratory, Beijing, China
Fundamental Science on Novel Inertial Instrument & Navigation System Technology Laboratory, Beijing, China
To avoid the broadening of Zeeman resonances of the vector atomic magnetometer working in an unshielded environment, the rapid and accurate
magnetic compensation is necessary. A three dimensional mini spherical compensating system is presented, which can be used together with a chip-scaleatomic magnetometer to realize an ultra-high precision field measurement. Based on the field gradient method, parameters are optimized to obtain auniformity of 10-3 over the region of one half radius with a good tolerance on dimensional variations. A prototype applied in the single laser beamscheme has been built and the experimental results demonstrate the validity of the design.

2P1-046

DES IGN, SIMULATION AND FAB RICATION OF A MICROMACHINED CANTILEVER-B AS ED FLOWSENSOR …………………………………………………………………………………………………………………………No.328
Pei Chen, Yu long Zhao, Yiyao Li
State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an, China
A micromachined cantilever-based flow sensor is designed, depending on the detection of surface strain on the cantilever caused by the mass flow. In thecontinuous flow mode, the deflection of cantilever is directly proportional to the flow rate. The working mechanism of the strain beam in the flow sensor
is analyzed, and the finite element method(FEM) is used to investigate the structural deformation and stress distribution, and the FLUENT is used toanalysis the coupling characteristics between the fluid and solid. According to the simplified stress analysis and simulation results, the flow sensor has asufficient structural strength within its measure range of 10 to 200ml/min, and will achieve ideal static characteristics that meet the requirements ofpractical applications. By varying the design of the cantilever, the measurement range and sensitivity of the sensor can be changed.

2P1-047APPLICATION OF MICROMACHINED QUARTZ TUNING FORK RES ONATOR FOR TEMPERATURE S ENS ING……………………………………………………………………………………………………………………………………No.360
Xin Li1 , Jing Ma2, Hai-bo Xu 2, Zhi-chao Jia2
1
Computer Center, Harbin University of Science and Technology, China
2
College of Automation, Harbin University of Science and Technology, China
This article describes a micromachined quartz tuning fork resonator, 6 mm in height by 2 mm in diamter, holding a two-terminal electronic component
with a nomial frequency of 36 kHz (at zero degree) and 15 pF typical capacitance paked in a 90 Pa He gass sealed metal container, which has been used
as a sensor for temperature measurement with good sensitivity, repeatability and reliability. The temperature sensor is ZYtw-cut-quartz crystal bulk
acoustic wave resonator vibrating in a flexural mode. Finite element method is used to analyze the vibratory modes and optimize the structure of thesensor. Design and performance analysis of the quartz tuning fork temperature sensor has been conducted. The sensor prototype was successfully
fabricated and calibrated in operation from 0°C to 100°C with sensitivity of 80 ppm/°C.

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2P1-048

PHOTOCATALYTIC DIGES TION OF TOTAL PHOSPHORUS IN THE PRES ENCE OF H2O2 UTILIZING NANO-TiO 2
PHOTOCATALYS T ……………………………………………………………………………………………………………No.363
Tian Dong 1, 2, Jianhua Tong 1, Chao Bian 1, Jizhou Sun 1, Shanhong Xia1
1
State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing, China
2
University of Chinese Academy of Sciences, Beijing, China
In this work, an ultra-violet (UV) photocatalysis method in the presence of H2O2 tilizing nano-TiO2 photocatalyst is presented for the digestion of total
phosphorus (TP) in water. The UV digestion of 4 mg/L of sodium glycerophosphate solutions (by weight of P) were conducted at different digestion timeand concentrations of H2O2. The H2O2 added to the water samples could increase the formation rate of strong oxidant hydroxyl radicals (·OH), but excess
H2O2 will consume ·OH and reduce the conversation rate. The optimum concentration of H 2O2 obtained in this work was 740mg/L. At the condition of
60min and 740 mg/L of H2O2, the conversion rate of sodium glycerophosphate reached about 90%, and the maximum value of rate constant k was 0.0306
min-1. Compared with the traditional thermal oxidation method for TP digestion, this UV/ H 2O2 hotocatalysis digestion method enables the digestion
process work at normal pressure. Compared with the individual UV photocatalysis process, UV/ H 2O2 digestion method decreases the digestion timefrom two hours to about an hour.

2P1-049

ANALYS IS OF ELECTROMECHANICAL INTERFACE MODEL FOR LIQUID FLOATEDMICRO-GYROSCOPE …………………………………………………………………………………………………………No.372
Mingyuan Ren 1,2, Xiaowei Liu 1, Wen Zuo 1, Zh igang Mao 1
1
MEMS center, Harbin Institute of Technology, China
2
Software school, Harbin University of Sceince and Technology, Harbin, China
This paper presents an electromechancial interface model of liquid floated micro-gyroscope, which can analyze sensing capacitors and resistance ofgyroscope. The impacts of them are analyzed and simulated with the simulation software of circuit. The analytic results indicate that the reasonableinterface circuit can substantially remove the impacts of these parasitic capacitances, increase the signal noise ratio. To ensure the high resolution, themodel of liquid floated micro-gyroscope with ANSOFT conducted. The results show the transfer characteristics of the sensor and nonlinear error oftransfer characteristics.

2P1-050A MET HOD OF STRUCTURAL TRIMMING TO REDUCE MODE COUPLING ERROR FOR MICRO-GYROSCOPES……………………………………………………………………………………………………………………………………No.374
Songqi Hu, Hongjuan Cui, Kun He, Zhanqiang Hou, Peng Chen, Dingbang Xiao, Xuezhong Wu
College of Mechatronics and Automation, National University of Defense Technology, Changsha, China
This paper presents a novel method of structural trimming to reduce the mode coupling error with the focus on micro-gyroscopes. A UV nanosecond
laser was used to remove materials with determined size at certain point on the vibratory structure of the micro-gyroscope. The peak-peak voltage of themode coupling error signal of the gyroscope prototype studied in this paper could be reduced from 3.52V to 0.082V. Furthermore, the zero-velocity
output of the same gyroscope prototype was decreased from 244mV to 14mV after coarse trimming and fine trimming. Demonstrated theoretically andexperimentally, this structural trimming by UV nanosecond laser is an effective way to reduce mode coupling error for improving the micro-gyroscope
performance.

2P1-051

RELIAB ILITY EVALUATION OF MICROMIRROR OF DOUB LE S-S HAPED UNIMORPH PIEZOEL ECTRIC
ACTUATOR WITH PROBAB ILIS TIC APPROACH ………………………………………………………………………No.376
Wenjing Liu, Yongming Tang, Baoping Wang
School of Electronics Science and Engineering, Southeast University, Nanjing, China
This paper presents the long time reliability evaluation of a micromirror with double S-shaped unimorph piezoelectric (dSUP) actuator design using aprobabilistic approach. The lifetime (number of cycles to failure) of the piezoelectric actuator, electrical strength, and electrical load are considered as therandom variables; and their probability distributions are discussed. The interference model of electrical load and electrical strength is used to evaluate thereliability of dSUP actuators. By this approach, the relationship between the reliability and the lifetime of the dSUP actuator has been deduced.

2P1-052

REPEATAB ILITY STUDY OF 2D MEMS MIRRORS B AS ED ON S-S HAPED Al/SiO2 BIMORPHS ………………No.377
Qiao Chen 1, Hao Zhang 1,2, Xiaoyang Zhang 3, Dacheng Xu 2, Hu ikai Xie3
1
Wuxi WiO Technology Co. Ltd, Wuxi, China
2
College of Electronics and Information Science, Soochow University, Suzhou, China
3
Department of Electrical and Computer Engineering, University of Florida, Gainesville, Florida, USA
MEM S devices based on bimorphs are affected by several effects including creep, stress, and fracture in bimorph structures. In this paper, we present thereliability study of an Sshaped bimorph M EM S mirror. The following tests are performed: 100 million cycle scanning, vibration, and isothermal holding.
Only 0.4% scan angle change was observed after experiencing a 6-axis, 20g vibration. A maximum 0.7% change was measured after the MEM S mirror
gone through an isothermal holding for 10 hours at 150℃. After a 100 million cycles of scanning, the maximum drift was less than 0.01.

2P1-053

MAGNETO-FEM ANALYS IS FOR MICRO ACTUATOR US ING ARRAY OF MAGNETIC EL EMENTs …………No.386
Fujio Tsumori, Kenji Hatama, Hyungoo Kang, Toshiko Osada, Hideshi Miura
Department of Mechanical Engineering, Kyushu University, Japan
This paper reports a magnetic actuator using interaction between micro magnetic elements. It was already reported that the present actuator can work88even if the structure was miniaturized to nano-scale. In the present work, simple fabrication process with photolithography and PDM S casting was
employed to obtain beam type structures with micro array of magnetic elements on their surface. Two samples with simple grid patterns were prepared
for testing. These samples had the same grid pattern but different orientation, which caused directly opposite bending deformation under the same appliedmagnetic field. We used magneto finite element method (FEM) to explain the behavior of the present actuators.

2P1-054CANTILEVER ARRAYED B LOOD PRESS URE S ENSOR FOR ARTERIAL APPLANATION TONOMETRY ……No.409
Byeungleul Lee1, Jin woo Jeong 2, Chanseob Cho 3, Jinseok Kim4, Bonghwan Kim5, Hyeon Cheol Kim6, and Kukjin Chun 2
1
Mechatronics Engineering, Korea University of Technology and Education, Chungnam 330-708, Korea
2
Electrical and Computer Engineering, Seoul National University, Seoul 151-742, Korea
3
School of Electrical Engineering, Kyungpook National University, Gyeongbuk, Korea
4
Center for Bionics, Biomedical Research Institute, Korea Institute of Science and Technology, Seoul, 130-650, Korea
5
Electronics Engineering, Catholic University of Daegu, Gyeongbuk 712-702, Korea
6
Electrical Engineering, University of Ulsan, Ulsan 680-749, Korea
We developed a cantilever-arrayed blood pressure sensor array fabricated by (111) silicon bulk-micromachining for the noninvasive and continuous
measurement of blood pressure. The blood pressure sensor measures the blood pressure based on the change in resistance of the piezoresistor on a
5-μm-thick-arrayed perforated membrane and 20-μm-thick metal pads. The length and width of the unit membrane are 210 and 310 μm, respectively. The
width of the insensible zone between adjacent units is only 10 μm. The resistance change over contact force was measured to verify the performance. The
good linearity of the result confirmed that the PDM S package transfers the forces appropriately. The measured sensitivity was about 4.5%/N. The
maximum measurement range and resolution of the fabricated blood pressure sensor were greater than 900 mmHg and less than 1 mmHg, respectively.

2P1-055

A NOVEL FLEXIB LE CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUC ER (CMUT) ARRAY WITH
ISOLATED METALLIC IS LANDS RIVETED TO A POLYMER FILM …………………………………………………No.414
Po-Fat Chong, Xiao mei Shi, Ching-Hsiang Cheng
Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hong Kong
This paper reports a method for fabricating CMUT arrays using a novel rivet structure to fasten isolated metal islands to the flexible polymer film.
Previously, a stretchable CMUT array was reported from our group, in which both the membrane and the cavity were fabricated using
polydimethylsiloxane (PDM S) then bonded together by O2 plasma when electrodes were made by screen-printing of liquid metal alloy. Comparing to the
PDM S membrane, the nickel membrane used here has higher resonant frequency for ultrasonic imaging. In this CMUT array, nickel over-plating is
employed to form the rivet structure for securing metal islands to the polymer film, which can solve the adhesion problem between metal and polymer.
EPON 1002F photoresist can be patterned to form via holes and also serves as the polymer film.The calculation result shows that the concave bottom
electrode can increase the device capacitance compared to the rectangular bottom. The preliminary experimental result shows a resonant frequency ataround 6.25MHz by using an impedance analyzer.

2P1-056

AN ELECTROSTATICALLY DRIVEN PERIS TALTIC MICROPUMP WITH AN INDIUM TIN OXIDE EL ECTRODE……………………………………………………………………………………………………………………………………No.416
Bonghwan Kim1, Ki Sung Lee2, and Mark A Shannon 2
1
Department of Electronics Engineering, Catholic University of Daegu, Gyeongbuk, Korea
2
Mechanical Science and Engineering, University of Illinois, Urbana, IL, USA
An electrostatically driven valveless double-sided peristaltic micropump with an indium tin oxide (ITO) transparent electrode has been developed for gas
chromatography. In order to verify the motion of the pump, an ITO-ITO micropump was fabricated, and in order to measure flow rate, an ITO-Si
micropump was fabricated. The micropump was fabricated on an ITO on glass substrate and a silicon substrate with a polyimide membrane. A maximum
flow rate of 27.19 μl/min was measured at 4 Hz and 100 V DC. The micropump was operated by 4 electrodes with a 4-phase sequencing actuation.

2P1-057

STRUCTURE DES IGN OF OUT-PLANE EVANESCENT COUPLING ACCEL EROMET ER WITH S UB-WAVEL ENGTHGRATINGS ……………………………………………………………………………………………………………………No.423
Lishuang Feng 1, 2, Baoyin Yao 1, 2 , Zhen Zhou 1, 2, Wenpu Wang 1, 2, Xiao Wang 1, 2
1
Key Laboratory of Micro-nano Measurement-manipulation and Physics (Ministry of Education), Beihang University, Beijing, China
2
Fundamental of Science on Novel Inertial Instrument & Navigation System Technology Laboratory,Beihang University, China
Evanescent Wave Coupling accelerometer, based on near-field evanescent waves coupling by means of sub-wavelength gratings, is a novel M OEM S
accelerometer with high performance. It is widely used in highly precise navigation, seismic sensing and oil-field etc. for its immunity to electromagnetic
interference, remote sensing, extremely high-sensitivity[1]. However, it is difficult to realize such kind of accelerometer due to the fabrication of
sub-wavelength gratings with high aspect ratio. Recently, out-plane MOEM S accelerometer based on evanescent wave coupling using sub-wavelength
gratings has generated considerable interest for its fabrication simplicity. We envisioned a novel out-plane evanescent wave coupling accelerometer withhigh precision integrating the large mass, weak spring and sub-wavelength gratings together. Design and simulation of the overall structure were madewith ANSYS. The novel out-plane accelerometer was finally designed with displacement sensitivity 2023 nm/G, corresponding to 1st diffraction beam
optical sensitivity 0.46%/mG. These results provide a theoretical basis for design and fabrication of out-plane evanescent coupling accelerometer.

2P1-058

FABRICATION AND ANALYS IS OPTICAL MICROSPHER E CAVITY B AS ED ON HIGH Q ERB IUM-DOPED …No.427
Shu-Bin Yan 1,2 , Xiao-Qian Wang 1,2, Ke-zhen MA 1,2, An-fu ZHA NG3, Chen-Yang Xue1,2, Wen-Dong Zhang 1,2

89

1Key Laboratory of Instrumentation Science & Dynamic Measuremen, North university of China, Taiyuan, China
Science and Technology on Electronic Test & Measurement Laboratory, North university of China, Taiyuan, China
School of electronics and computer science and technology, North University of China, Taiyuan, China

2
3

Using CO2 laser metal method process the top of erbium-doped tapered fiber, which formed by stretching a standard optical fiber (SM F-125) whileheating it with a hydrogen flame. The top of tapered fiber formed erbium-doped microsphere cavity with higher spherical by its surface tension when
heating is stopped. The size of erbium-doped microsphere is 21μm. The position of erbium-doped microsphere is accurately adjusted between the pump
power and monochromatic spectrometer so that it can be easily excited by 980 nm and 1480 nm infrared light. Excited erbium ions produce energy leveltransition and a number of sharp transmission spectrums are observed around the center wavelength of 1550nm. It expanded the spectrum wide andproved the frequency selection role of micro-cavity. Further analysis of the experimental results, we obtained the quality factor Q=4.4×108 throughcalculating the transmission spectrum which is consistent with the theoretical value largely.

2P1-059

STRUCTURE DES IGN AND S IMULATION OF MICRO DYNAMICALLY TUNED GYROSCOPE WITH THREE
EQUILIB RIUM RINGS …………………………………………………………………………………………………………No.430
Dunzhu Xia, Cheng Yu, Shourong Wang, Hongsheng Li, Lun Kong
Key laboratory for Micro-inertial Instrument and Advanced Navigation Technology of Education Ministry, Southeast University,
Nanjing, China
The structure of a micro dynamically tuned gyroscope (MDTG) with three equilibrium rings has been designed to eliminate the error caused by the
double rotation frequency of the driving shaft like traditional DTG. Some simulations under the optimized structure parameters are given. The mode
frequency is separated from 167Hz of the rotation frequency of the motor as simulated. The static deformation is controlled within less than 1μm undergravity and a load in our mechanical simulations. The dynamic deformation is simulated when the rotor rotates at a specified speed. The assembly
distance between the electrode plates and the rotor disk is chosen from 40μm to 60μm after the static capacitance simulation.

2P1-060

TIP-TILT-PIS TON PIEZOEL ECTRIC MICROMIRROR WITH FOLDED PZT UNIMORPH ACTUATORS ………No.431
Wenjun Liao 1, Wenjing Liu 1, 2, Yong ming Tang 2, Baobing Wang 2, Huikai Xie1
1
Department of Electrical and Computer Engineering, University of Florida, USA
2
School of Electronics Science and Engineering, Southeast University, Nanjing, China
This paper presents the design, fabrication and characterization of a novel tip-tilt-piston (TTP) scanning micromirror based on an array of folded
piezoelectric unimorph actuators. The micromirror can perform rotational scan around two in-plane orthogonal axes as well as out-of-plane piston
motion. The measured resonant frequencies of the fabricated micromirror are 362 Hz (piston), 685 Hz (x axis scan), 1250 Hz (y axis scan) and 19.2 kHz(fast y axis scan), respectively.

2P1-061

ARTIFICIAL HAIR CELL S ENSORS US ING LIQUID METAL ALLOY AS PIEZORES ISTORS ……………………No.434
Xiao mei Shi, Ching-Hsiang Cheng
Department of Industrial and Systems Engineering, The Hong Kong Polytechnic University, Hong Kong
In this paper, we present the design, fabrication process, and testing results of an artificial hair cell sensor made by liquid metal encapsulated in apolydimethylsiloxane (PDM S) substrate. Previously, a flexible force sensor was reported from our group, which can detect both normal and shear forcesby using liquid metal alloy (Ga-In-Sn) as piezoresistive gauge material encapsulated in a PDM S substrate. Based on this method, we propose an artificial
hair cell sensor which can detect
two-axis tactile force with a standing artificial hair shaft. Since the liquid-metal piezoresistors deform with theelastomeric substrate, normal and shear force can be detected with resistance changes of the piezoresistors. Each force sensor comprises a pair ofsymmetric piezoresistors, which is screen-printed on a suspended PDM S membrane with opposite direction to be sensitive to shear forces. The testing
results demonstrate the sensitivity of the force sensor in two-axis directions.

2P1-062

A MICROMACHINED GYROSCOPE WITH AN EFFECTIVE S TRESS-REL EAS ED FRAME ………………………No.441
Xin Yu, Wu Xuezhong, Xiao Dingbang, Hou Zhanqiang, He Kun, Chen Zhihua
College of Mechatronics and Automation, National University of Defense Technology, Changsha, China
Structural stress is one of the main factors that influence the performance of micromachined gyroscopes. This paper mainly analyzed the origin of heatstress and its impact. Then an elastic stress-released frame structure was designed to reduce the heat stress of the micromachined gyroscope. Simulations
were done to prove the effect of the novel structure. Also, a dry-wet-etch-combined fabrication method was put forward to fabricate the micromachined
gyroscope. Finally, the vacuum property of the gyroscope was tested as well as the scale factor and the bias stability. The scale factor was 50 mV/˚/s andthe zero bias stability turned out to be 58.60, 35.00 and 31.14 when it started 0 second, 10 minutes and 15 minutes after it was charged.

2P1-063

A TRIAXIAL MONOLITHIC S ILICON ACCEL EROMET ER WITH IMPROVED TEMPERATURE
CHARACTERIS TICS …………………………………………………………………………………………………………No.444
Peng Chen, Dingbang Xiao, Zh ihua Chen, Ye Yuan, Xinghua Wang, Songqi Hu, Yulie Wu
College of Mechatronics and Automation, National University of Defense Technology, Changsha, China
A novel triaxial monolithic silicon accelerometer with improved temperature characteristics is presented in this paper. Two methods were put forward to
improve the temperature characteristics of the accelerometer. One is the optimization of the anchor configuration to decrease the temperature drift, andthe other is the integration of an on-chip matching capacitor to counteract capacitance variation. A facile micromachined process flow was investigated,
and the differential capacitance readout circuit was setup. The FEM simulations and experimental results prove that the methods are available andeffective.

90

2P1-064

MICRO-FABRICATED POLYMERIC THERMAL ACTUATORS ARRAY FOR RECTIFYING THE DEFORMATION OF
MEMS S UBSTRATE …………………………………………………………………………………………………………No.456
Xinghua Wang, Dingbang Xiao, Zh ihua Chen, Zhanqiang Hou, Xuezhong Wu, Jianbin Su
College of Mechatronics and Automation, National University of Defense Technology,Changsha, China
To improve the performance of MEM S device, it is critical that the effect of environmental parameters on these devices be controlled or eliminated. In
this paper, we first developed a novel technique by employing thermal actuator and actuators array to rectify the micro deformation of M EM S substrate
due to thermal mechanical stress as a result of temperature variation. This PTAA consisting of a 50 μm thick silicon membrane which is supported by anactuators array. The polymeric thermal actuator array (PTAA) was fabricated utilizes SU-8-2100 (Microchem Crop., USA) as the main functional
material and thin Titanium/Aluminum(Ti/Al) electrode layer as the microheater. The numerical analysis of the PTAA was implemented with ANSYS
based on an thermal-mechanical coupled simulation. According to the analysis results, the actuators tend to have relatively high stiffness and large
displacement in actuation direction, reaching 3μm in simulation. The PTAA were able to achieve accurate rectifying of the substrates’ deformation. We
mainly present the design, simulation and operation principle of this novel PTAA.

2P1-065

CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER AS A RES ONANT TEMPERATURESENSOR………………………………………………………………………………………………………………………… No.476
Zhikang Li1, Libo Zhao 1, Zh iying Ye1 , Hongyan Wang 2, Yulong Zhao 1, Zhuangde Jiang 1
1
The State Key Laboratory for Manufacturing System Engineering, Xi’an Jiaotong University, Xi’an, China
2
Shaanxi Institute of Metrology Science,ian, Shaanxi, China
The capacitive ultrasonic transducer (CMUT) was initially proposed for temperature measurement. A simple CMUT structure and the corresponding
matching circuits were designed. Then the effects of vibration modes and bias voltage on sensitivity were analyzed by the finite element method. The
results showed that the resonant frequency varied almost linearly with the temperature over the range of 45 ℃ to 120 ℃, and the sensitivity and thenonlinear error were about -1931.6ppm/℃ (or -21.2 kHz /℃) and 1.33% respectively when the CMUT working at the first order vibration mode with abias voltage of 22.05V. It was demonstrated that the first order vibration mode had a higher sensitivity than the other three higher modes and thesensitivity could be adjusted by the bias voltage.

2P1-066

DIGITAL CLOS ED-LOOP DRIVER DES IGN OF MICROMECHANICAL GYROSCOPES BAS ED ON COORDINATEDROTATION DIGITAL COMPUTER ALGORITHM …………………………………………………………………………No.499
Yu xian Liu, Chunhua He, Dachuan Liu, Zhenchuan Yang, Guizhen Yan
National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing, China
A novel digital closed-loop driver is presented for a micromechanical vibratory gyroscope in this paper. Coordinated rotation digital computer algorithm
is applied to generate the sine and cosine signals for driving and demodulation processing. M eanwhile, automatic gain control and phase-locked loop are
adopted to maintain a constant velocity of the drive mode and guarantee the gyroscope working in the resonant mode. All the control methods are
implemented in FPGA device. Experimental results demonstrate that the stability of the amplitude of the drive velocity is about 18ppm, which verifies
the effectiveness and accuracy of the digital closed loop for the drive mode. The scale factor, nonlinearity and bias instability of the gyroscope withclosed loop controlled sense mode are measured to be 18.5mV/deg/s, 0.088% and 19.4deg/h, respectively.

2P1-067

AUTOMATIC DET ECTION AND COUNTING OF NEMATODES US ING A NEW PORTAB LE LENS LESS IMAGING
PLATFORM ……………………………………………………………………………………………………………………No.508
R. Jolivot1, U. Jarujareet1, P. Sarapukdee2, N. Khemthongcharoen 1 and W. Piyawattanametha1, 2
1National Electronic and Computer Technology Center, Klong Luang, Pathumthani, 12120, Thailand
2
Advanced Imaging Research Center, Faculty of Medicine, Chulalongkorn University, ,Pathumwan, Bangkok, 10330, Thailand
This paper demonstrates a low-cost portable hologram imaging platform combined with an automatic detection and counting algorithm of micro-object.
The aim is to develop a system to automatically count nematode. The developed algorithm is composed of several steps. Hologram images captured fromour platform are preprocessed to enhance the raw images and improve further analysis. The second step of the algorithm is based on feature extraction
which is a necessary step to describe the detected data. The final step is the classification of the feature combination into two separates class, nematodes
and non-nematodes elements, which is based on a kmean classifier. Numerous tests have been performed to select the best feature combination, yielding
high detection and counting rate. The average computational time is of 52.37 seconds, specificity and sensitivity of our algorithm on a 2593×1944 pixels
image are 0.978 and 0.923 respectively. The algorithm is only focused on the detection and counting problem and not on computational time.

2P1-068

REALIZATION OF QUARTZ MEMS ACCEL EROMET ER BAS ED ON FLIP CHIP PROCESS ……………………No.514
Jin xing LIANG, Sujin CUI, Liyuan ZHANG, and Ancheng SHAO
Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology, Ministry of Education, School of Instrument
Science and Engineering, Southeast University, Nanjing, China
This research attends to provide a simple and effective way to precisely assemble a quartz M EMS accelerometer, which is composed of a double-ended
tuning fork (DETF) force transducer, and a base-proof mass structure. Flip chip method is proposed to bond the two sides of DETF in length direction
onto the base and proof mass structure via AuSn solder utilizing the self alignment function of reflow process. Finite element analysis method is used todesign and optimize the sensor structure including the dimensions of DETF, mass proof and solder bump height and so on. The optimized accelerometer
sensitivity is about 50 Hz/g at a fixed planar dimension in 4 mm×8 mm. The DETF is fabricated on a 100 μm thick Z cut wafer and the monolithic
base-proof mass structure, which is linked with a thinned flexure, is fabricated on a 300μm thick wafer using well established quartz M EM S wet etchingprocess.

91

2P1-069

WEAK LIGHT CHARACTERIS TICS OF A NEW PHOTOELECTRIC S ENSOR WITH POTENTIAL B IOS ENSORAPPLICATION …………………………………………………………………………………………………………………No.554
L. Ding, M. J. Wang, Y. Q. Li, X. Y. Liu, J. H. Shen, F. M . Guo
Laboratory of Polar Materials & Devices, School of Information Science Technology, East China Normal University, China
We have designed and developed a field deployable biosensor unit based on a novel proprietary quantum dots-quantum well hybrid structure. We
analyzed in detail the detection sensitivity and in particular weak light detection and analysis of the semiconductor optoelectronic device. We designed areadout circuit and a data processing unit to handle the response signal. The sensor unit is equipped with a LCD element for data display and can be used
in a centrally managed real-time monitoring system such as for infectious disease management and bio-aerosol monitoring. The high sensitivity of oursensor enables fast and reliable spectral results to aid rapid identification of biological samples.

2P1-070

DES IGN OF A NOVEL DEVICE FOR LIVER CANCER B IOMARKERS DET ECTION ………………………………No.161
Shuaipeng Wang 1,2 , Shungao Yin 1,2, Jingjing Wang 1,2, Quan Yuan 1,2 , Jinling Yang 1,2 and Fuhua Yang 1
1
Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2State Key Laboratory of Transducer Technology, Shanghai 200050, China
Cantilever-based sensors have been widely used in biochemical analysis [1]. However, for the cantilever sensor working in a dynamic mode, theresonance frequency shift not only depends on the mass change, the variation of lever stiffness k caused by the biomolecular adsorption also could havesubstantial contribution to the frequency shift, and this will result in distinct error for mass detection [2]. In this paper, a novel cantilever array sensor was
micro-fabricated for precise bio-marker detection. In order to reducing the effect of k variation due to adsorption, a local biochemical reaction cavity was
designed in the free end of the cantilever. Thus the adsorption of cancer biomarker takes place only in the local region of the cantilever instead of thewhole lever. This configuration has dramatically improved the performance of the biosensor.

2P1-071

A X-B AND SWITCHED-LINE 5-B IT PHAS E S HIFTER WITH RF MEMS MULTITHROW SWITCHES ……………No.189
Y. Du, J. Bao, Z. He, J. Jiang
Department of Electronic Engineering, University of Electronic Science and Technology of China, Chengdu, China
In this paper, a 5-bit switched-line phase shifter is designed, processed and tested for X-band application, which is based on packaged RF M EM S
single-pole double-throw(SPDT) and single-pole four-throw(SP4T) switches to get an compact structure. The design and optimization are carried out by
analyzing the non-ideal performance of packaged RF M EM S switches and extracting their circuit model parameters. The effects of the bonding-wireconnecting RF M EM S switches and peripheral circuits are also analyzed and modeled. The 5-bit phase shifter shows the average measured insertion lossof -3.1 dB, the average return loss of -21.1 dB, and the average absolute phase error of 2.2°at 10GHz. By comparison of simulations and measurements,
this paper proposes that the main factors to effect the performances of phase shifters with packaged M EM S switches are parasitic inductances introducedby the bonding- wire and limited isolation of the used switches.

2P1-072

ENERGY REVERS IB LE S I-BAS ED NEMS SWITCH FOR NONVOLATILE LOGIC S YSTEMS ……………………No.282
Liam Boodhoo 1, Yun Peng Lin 1, Harold M. H. Chong 1, Yoshishige Tsuchiya1, Tsuyoshi Hasegawa2 and Hiroshi Mizuta1,3
1Faculty of Physical and Applied Sciences, University of Southampton, UK
2
Atomic Electronics Group, National Institute for Materials Science, Japan3
School of Materials Science, Japan Advanced Institute of Science and Technology, Japan
The paper presents design, analysis and fabrication of novel silicon-based, low power, non-volatile NEM S logic switches. Non-volatility is achieved by
exploiting the Casimir effect and the van der Waals force at mechanical contact between an in-plane, laterally moveable transistor channel and two
opposing side gates. M echanical symmetry is implemented in the design for switching to be energy reversible. Device operation is simulated by couplingclose range interatomic force calculations with 3D FEM simulation. ‘On’ and ‘Off’ transistor states are maintained by controlling the surface area of
mechanical contact between the beam and the gate electrode. To achieve this, two nano-stiction state controller designs are proposed for experimental
comparison. Preliminary devices have been successfully fabricated using ebeam lithography to verify minimum feature size of proposed structures.

2P1-073

METAL-CATALYS T FREE INTEGRATION OF SiO2 NANOWIRES INTO CARBON MEMS ………………………No.350
Liangliang Xu 1, Tielin Shi1, 2,Shuang Xi1, Hu Long 1,Shiyuan Liu 1 ,and Zirong Tang 1,2
1State Key Laboratory of Digital Manufacturing Equipment and Technology, Huazhong University of Science and Technology, China
2
Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan, China
We presents an innovative technique of integrating silica nanowires to photoresist-derived carbon microelectromechanical systems (C-M EM S) on silicon
substrate. The silica nanowires were synthesized through thermal treatment in a tube furnace at 1200 ℃ under a gaseous environment of N2 and H2.
The stiff morphology and radicalized distribution around carbon posts of nanowires was observed, which was different from previous studies.
High-temperature annealing and meticulous-controlled pyrolying atmosphere could affect the formation of unusual SiO2/C-M EMS integrated structures.

2P1-074

ALGORITHM ANALYS IS OF PHM FOR S ENSITIVE CARGO TRANSPORTATION ………………………………No.357
Lou Wenzhong, Liu Peng, Guo Mingru
State Key Laboratory of Mechatronics Engineering and Control, Beijing Institute of Technology, China
Several Prognostics and Health M anagement (PHM) algorithms are to be analyzed in this paper, and the purpose is set to master the know-how of the
optimization of the prognostic algorithms. To implement the PHM for sensitive cargo transportation, based on the original data collected during thededicated tests, applying the microsystem hardware designed and assembled by the research team, as well as the embedded software. At the end, theframework of the system platform in the future is layouted.

92

2P1-075

HIGH IMPACT-INDUCED FAILUR E OF A NOVEL SOLID MEMS SWITCH ………………………………………No.358
Wang Ying, Lou Wenzhong, Zhao Yue, Wang Fufu
State Key Laboratory of Mechatronics Engineering and Control, Beijing Institute of Technology, Beijing, China
Due to the rapidly growing MEM S initiator market and the needs for smaller, safer and higher integration, more advanced switches are in demand. The
novel solid MEM S switch can improve the security and reliability of MEM S initiator, while the leads of its package are weak under high impact. This
paper mainly studied the leads reliability of the novel solid MEM S switch under high impact by FEM simulation analysis. Through simulation analysis，
the mainly weakness and the potential failure modes of the leads under high impact can be obtained, which can provide theory reference for the design
and application of the novel solid M EM S switch.

2P1-076

A HIGH POWER S UPPLY REJ ECTION RADIO VOLTAGE REFERENCE FOR EN ERGY HARVES TERS ………No.379
Hanru Zhang,Xiuhan Li
Institute of Electronic and Information and Engineering, Beijing Jiaotong University, Beijing, China
This paper presents a design of a high power supply rejection radio (PSRR) bandgap voltage reference (BGR) which is used in the processing circuit ofenergy harvesters. The improvement of the PSRR of the BGR is implemented through adding a pre-regulating circuit to improve the low frequency
PSRR and a low pass filter to improve the high frequency PSRR. The BGR is verified by using SM IC 0.18um 1P6M process. The supply voltage is 2.5 V
and the BGR provides a reference voltage of 1.19 V. The simulation results show that the PSRR at 1MHz is about -40 dB and the PSRR at DC region isabout -125 dB. This circuit also enhances the line regulation performance. A stable output voltage can be obtained when the supply voltage varies from
2.5 V to 6 V. The overall current consumption of this design is less than 50μA.

2P1-077

RES EARCH ON OPTICAL B IOLOGICAL S ENSOR US ED AS QUANTITATIVE ANALYS IS OF GLUCOS E ……No.425
Xue Chenyang 1, Wang Jingxue1 , Liu Chao 1, Wang Yonghua1, Cu i Danfeng 1, Zhang Wendong 1, 2
1
Science and Technology on Electronic Test & Measurement Laboratory (North University of China), Taiyuan,China
2
Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, Taiyuan, China
In this paper, we designed and fabricated the biological sensor structure on silicon-based chip and then fixed glucose oxidase molecular on the siliconwafer in chemical bond forms through surface oxidation activation, silane coupling agent deposition, link molecules fixing and glucose oxidase linking.
M icro-ring resonator with whispering gallery mode is developed to improve the Q factor and thus enhance the sensitivity of the bio-sensor. In this way,quantitative analysis of the glucose in the test liquid can be achieved through the biological sensor by measuring the shift of the resonant wavelength intransmission spectrum.

2P1-078

TWO STEPS CONTROLLED RELEAS ED MICRONEEDLE PATCH US ED FOR HYPERPIGMENTATION ……No.437
Tzu-Hui Huang, Chien- Chung Fu, Hsin-Wen Sung
Institute of Nano Engineering and MicroSystems (NEMS), National Tsing Hua University, Taiwan
Transdermal delivery is an efficiency way to deliver active ingredients without degraded by GI system and EPR effect. In these years, microneedles patch
fabricated by micro mechanical approach allows us to across the skin feasible for a much wider rang of drug. For the traditional treatment ofhyperpigmentation, a fixed triple combination cream offer maximal efficacy for clinical trial. However, clinical study showed that over 87.5% of patientswere noted to have side effects with cream treatment. Here we propose a new design of microneedles patch with better drug localization in different skinlayer to treat hyperpigmentation and two- steps controlled released microneedle to eliminate the irritation. The two-step release microneedle patch madeof two kinds of biomaterial is prepared by controlling the concentration of tip material. This approach can be a potential technology enabling directtranscutaneous delivery in clinical applications.

2P1-079

EFFECT OF IN ADDITION ON MECHANICAL PROPERTIES OF Sn-9Zn-In/Cu SOLDER ………………………No.454
Yi-Ta Wang *, Cheng Jen Ho 1, Hsien-Lung Tsai2*
Department of Mechanical and Electromechanical Engineering, National ILan University, ILan, Taiwan
1
Acer Inc., New Taipei City , Taiwan
2
Department of Mechanical Engineering, National Taiwan University of Science and Technology, Taipei, Taiwan
In this study, trace amounts (0.5-2 wt%) of indium (In) are added to the Pb-free Sn-9Zn solder. Expect to improve the mechanical properties and find out
the optimum conditions of Sn-9Zn-In solder. Tests are conducted to measure micro-hardness and shear strength while microstructure and morphology offracture surface are observed using scanning electron microscope with elemental composition analyzed by energy dispersive spectrometer. Results showthat addition of In to Sn-9Zn solder alloy leads to needle-shaped precipitates formed in the substrate. This not only increases micro-hardness, but alsoenhances shear strength at Sn-9Zn-In/Cu solder joints. Improvements in both micro-hardness and shear strength confirm that adding In to the solder alloy
can contribute to better mechanical properties of Sn-9Zn-In/Cu joints with proper control of soldering temperature and time.

2P1-080

FAST S YNTHES IS OF DENDRITE CRYS TALS ASSISTED B Y ACEO AND THE CONTROLLABLE
SURFACE-ENHANCED RAMAN SCATTERING IN EL ECTRIC FIELD ……………………………………………No.457
Jianlong Ji1, 2, Pengwei Li1, Shengbo Sang 1, Jie Hu1, Gang Li1, Zhaoying Zhou 2, Wendong. Zhang 1
1
Micro and Nano-system Research Center, Taiyuan Univ. of Technology, Taiyuan, China
2
MEMS Laboratory, Dept. of Precision Instruments and Mechanology, Tsinghua Univ., Beijing, China
A simple and cost-effective orient electrodeposition strategy was developed to synthesize Au dendrites. Dendrites morphology can be prepared byadjusting the parameters, including electrolyte concentration, electrodes shape, AC voltage and frequency. These Au dendrites exhibited well93

reproducible surface – en-hanced Raman scattering (SERS) effect using Rhodamine B (RhB) as model molecule. Further experimental results
demonstrated that surface enhancement ability can be tuned by external DC electric filed. Our work not only provides a very simple, convenient,cost-effective, and fast route to synthesize Au dendrites, but also opens up new thinking on intelligent platform of new in-situ SERS sensing instruments.

2P1-081

INTEGRATING THE MICRO-HEAT ER AND MICROFLUIDIC CHIP TO GEN ERATE THE GELATIN EMULS IONSAND MICROCAPS ULES ……………………………………………………………………………………………………No.553
Chia-Hsien Yeh, Ke-Rong Chen, and Yu-Cheng Lin
Department of Engineering Science, National Cheng Kung University, Tainan, Taiwan.
The heatable microfluidic chip successfully integrated the micro-heater and flow-focusing device to generate the gelatin emulsions under the various
flow rate ratios and voltage, and the gelatin emulsions can apply to encapsulate the vitamin C for drug release. Our purpose is to create the heatablecondition for thermo-sensitive hydrogel material and generate the uniform emulsions under any external environment. The gelatin emulsion size isranged from 45 μm to 120 μm in diameter. Moreover, the gelatin microcapsules of various sizes with the vitamin C was used for drug release.

2P1-082

CONTROL OF SWIMMING IN CRUCIAN CARP: S TIMULATION OF THE B RAIN US ING AN IMPLANTAB LEWIRE
EL ECTRODE …………………………………………………………………………………………………………………No.208
Chuan Zhang, Jingquan Liu, Hongchang Tian, Xiaoyang Kang, Yuefeng Rui, Bin Yang, Hongying Zhu, Chunsheng Yang
Institute of Micro and Nano science and Technology, Shanghai Jiaotong University, Shanghai, China
Control of locomotion in different kinds of animals, or so-called bio-robot, has been reported. Bio-robot is a technology based on the information
communication between the nerve tissue and the computer. In this work, to study the locomotion control in carp’s brain, a Parylene-based wire
microelectrode is fabricated for stimulation in midbrain. Compared with traditional microelectrodes, wire electrodes provide better bio-compatibility andgood mechanical stability. The whole electrode was covered by Parylene C film, except the stimulation sites which are exposed by lift-off process, thus
the interface impedance is significantly reduced. After the fabrication, crucian carps was anesthetized in M S-222 water solution and the cranium waspartially removed to expose the midbrain. After all these steps, electrodes are tested to see if they are properly insulated. Then one electrode is implanted
into the crucian carp’s midbrain by surgical procedure and the movement of the fish is observed by a video camera. The caudal fin movement of crucain
carp is successfully induced by applying a single polar pulse train. This result proved the former theory that control region of carp is located in midbrain.
On the other hand, the experiment shows great potential and promising future in the bio-robotic fish.

2P1-083

SELECTIVE DISPERS ION OF HIGH PURITY S EMICONDUCTING S INGLE-WALLED CARBON NANOTUB ES WITH
POLYMERS FOR PRINTED THIN FILM TRANS ISTORS ………………………………………………………………No.224
Long Qian 1, 2, Jian wen Zhao 1
1
Printable Electronics Research Center,Suzhou Institute of Nano-tech and Nano-bionics, Chinese Academy of Science, Suzhou, China
2
Nano Science and Techonology Institute, USTC
Single-walled Nanotubes (SWCNTs) have been regarded as one of most promising materials for fabricating high-performance thin-film transistors(TFTs). However, it is difficult to obtain the high-performance SWCNT TFTs due to the presence of metallic SWCNTs. With the aid of appropriate
polymers (regioregular poly(3-dodecylthiophene, rr-P3DDT), solvent and temperature, we can achieve highly selective dispersion ofsemiconducting-SWCNTs (s-SWCNTs) and the high-performance SCNT TFTs with on/off ratio up to 2×107 and mobility up to 1.2 cm2 V-1s-1 wereobtained. It opens a way to print high-performance SWCNT TFTs based on the sorted s-SWCNTs.

2P1-084

LOW TEMPERATURE S YNTHES IS OF CUB IC B aTi O3 NANOPARTICLES …………………………………………No.227
Xin zhou Wu, Zheng Chen, Zheng Cui
Printable Electronics Research Centre, Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences,Suzhou,China
A new process has been developed to prepare nanocrystalline BaTiO3 at room temperature and atmospheric pressure. The experimental results show thatcubic BaTiO3 nanoparticles can be prepared even at room temperature (25℃). These cubic BaTiO3 nanoparticles are irregular quasi-spheres with the size
rangining from hundreds of nanometers to tens of nanometers as the temperature is increased from 25 to 80℃. Raman spectra of the products obtained at
different temperature confirmed that the BaTiO 3 were cubic phase. The influence of reactants concentration on the formation of BaTiO3 nanoparticles
was also investigated.

2P1-085

TUNNELING EFFECT ON ENHANCED OLED PERFORMANCE US ING Al2O3 B UFFER LAYER …………………No.230
L. Zhou, W. M. Su, Z. Cui
Printable Electronics Research Center, Suzhou Institute of Nano-Technology and Nano-Bionics, Chinese Academy of Sciences, 398
Ruoshui Road, Suzhou Industrial Park, Suzhou, China.
It has been found that introduction of buffer layers between organic holes transport layer and anode layer plays an important role in improving device
stability and hole injection efficiency of organic light-emitting diodes (OLED). As for the mechanism of the improvement due to the buffer layer, it isstill controversial. To understand the mechanism behind the enhanced performance of OLED by the buffer layer, a new model is therefore proposed
which combines classical model and quantum tunneling model to explain the OLED performance improvement. A thin Al2O3 insulating buffer layer
deposited on indium tin oxide (ITO) anode by atomic layer deposition has been investigated for OLED. The observed power efficiency and current
efficiency improvement at the optimal thickness of 1.4 nm are well explained by the model. A series of Al2O3 ilms of different thicknesses were
deposited on ITO anode and characterized. Their roughness, sheet resistance, surface potential, and resulted OLED current density were investigated. It isbelieved that the blocking of hole inject by the Al2O3 buffer layer makes more balanced carrier density in emission layer, thus enhances the current

94efficiency. Though less number of holes are injected in OLED due to the insertion of Al2O3 layer, quantum tunneling through the ultra-thin buffer layer
play an important role to contribute to the hole injection, which avoids crossing the interface barrier, resulting in less energy consumed and power
efficiency enhanced.

2P1-086

HIGH PERFORMANCE THIN-FILM TRANS ISTORS US ING POLYMER/SWCNT COMPOSITE S EMICONDUCTINGINK ………………………………………………………………………………………………………………………………No.233
Fan Zhang, Na Lv, Dongyu Zhang, Qiu Song
Printable Electronics Research Center, Suzhou Institute of Nano-tech and Nano-bionics,Suzhou, China
A novel conjugated polymers have been used for selectively dispersion of high purity semiconducting SWCNTs for the application in high-performancethin-film transistors (TFTs). With the sorted s-SWCNTs, we achieved high-performance SWCNT transistors with very high charge-carrier mobility andon/off current ratio synchronously.

2P1-087

PRINTED CATHODE WITH ALUMINUM INK FOR FLEXIB LE ORGANIC ELECTRONIC DEVICES …………No.237
F. Fei, W. M. Su
Printable Electronics Research Center, Suzhou Insititute of Nano-Tech and Nano-Bionics,Chinese Academy of Sciences, China
An Al precursor ink, OAlH3 (C2H5)2 has been prepared which can easily decompose and form metal Al at normal pressure and low temperature (80 ℃)
with the catalyst of TiCl4. The prepared Al films by drop-casting show a good quality with low resistance (1.86 Ω·cm) and low work function (3.76eV).
Cathodes prepared with the Al ink for flexible organic electronic devices on PET are also investigated by aerosol jet printing process, which indicatesthat printed Al cathode is a promising method to fully printable flexible devices such as organic light-emitting diodes, organic photovoltaic.

2P1-088

HIGHL Y CONDUCTIVE NANOSILVER INK TREATED AT MILD TEMPERATURES B Y RED UCING THE AMOUNTOF PVP …………………………………………………………………………………………………………………………No.306
FU Jilan, M O Lixin, Li Yaling, LI Weiwei, Li Wenbo, Ran Jun, Fan Xin ming, Zhao Xizhe & LI Luhai
Beijing Printed Electronics Engineering Technology Research Center, Beijing Institute of Graphic Communication,Beijing, China
Silver nanoparticles colloid was obtained by reducing the high molar concentration of AgNO3 (up to 3.92 M ) with the hydrazine hydrate (H4N2 • H2O) as
reductant in the presence of polyethylene pyrrole (PVP) as the protectant. It was well known that the polymer protective agent capped on the surface ofsilver nanoparticles could control the particles growth and stabilize the nanosilver suspension. Meanwhile, the insulative PVP capped on the surface ofnanosilver could prevent the transfer of electrons, resulting in the conductivity decreasing of the corresponding nanosilver films. Thus, the amount of
PVP should be reduced in order to improve its conductivity. The silver nanoparticles was treated by the chemical sedimentation, which is the mostwidely used solid-liquid separation method in the preparation of nanosilver conductive printing ink, for its low costing and without destroying thestructure of the silver nanoparticles. It was found that the treatment can effectively reduce the amount of PVP. Good dispersion and electricalconductivity nanosilver ink can be obtained by acetone sedimentation for three times. The average size of the particles after sedimentation is 120.3nm,
while the initial size is 92nm and no precipitation was observed even after aging for 15 days. Surface resistance of the silver layer coated on PET can be
reduced to 226.4mΩ/□ after heating at 100oC for 30s, and the conductive ink with these properties can be widely used in preparation of transparent
conductive film and RFID antennas.

2P1-089FABRICATION OF HIGHL Y TRANSPARENT ULTRATHIN FILMS B AS ED ON REDUCED GRAPHEN EOXIDE ……………………………………………………………………………………………………………………………No.333
Zuoping Xiong 1,2, Xuewen Wang 1, Ting Zhang 1
1
Suzhou Institute of Nano-Tech and Nano-Bionics, Chinese Academy of Sciences, Suzhou, China
2
Nano Science and Technology Institute, University of Science and Technology of China, Hefei, China
We developed a facile and reproducible method for fabrication of reduced graphene oxide (rGO) ultrathin films with high transparency (over 85% at 550nm), uniform sheet resistances (~106 Ω/sq), and controlled thickness. The rGO ultrathin films can be successfully obtained when spray-coated rGO on
glass slide was immersed in deionized water, and can be easily transferred to any substrates of interesting for further construction of
optoelectronic-devices.

2P1-090

SYNTHES IS AND S IZE CONTROL OF NANO/S UB MICRON COPPER PARTICLES B Y FEEDINGSTRATEGIES ……………………………………………………………………………………………………………………No.342
LIU Cheng mei* , LI Wenbo, HAN Lu , MO Lixin, ZHAO Yu xia, W EI Yan *, LI Luhai**
Printable Electronics Research Center and Key Lab of Printing and Packaging Material Technology,Beijing Institute of Graphic
Communication, Beijing, China*
Department of chemistry, Tsinghua University, Beijing, China
Using Copper nitrate trihydrate (Cu(NO3)2•3H2O) as precursor, hydrazine hydrate (N2H4•H2O) as reducing agent and Ploy(N-vinylpyrrolidone) (PVP) as
capping agent in the presence of Diethylene glycol (DEG), highly monodisperse copper particles with different diameters were successfully synthesized
via polyol method by different feeding strategies. Dynamic light scattering (DLS) and Scanning Electron M icroscope (SEM ) were used to characterize
the morphology and particle size of these particles. X-ray diffraction (XRD) was used to measure the chemical constituents of these particles. UV-Vis
spectrophotometer was used to signify the absorption spectrum of these particles. The results indicated that copper particles with controllable diametercan be synthesized by different injection rates. The average sizes of the prepared copper particles under 2, 4, 6, 8 ml/min of injection rate were 100nm,
200nm, 300nm, 400nm. The obtained copper particles were phase-pure crystalline, and their structure was face-centered cubic (fcc).

95

2P1-091

SYNTHES IS OF NANO-COPPER PARTICLES FOR CONDUCTIVE INK IN GRAVURE PRINTING ………………No.364
FAN Xin ming, M O Lixin, LI Wenbo, LI Weiwei, RA N Jun, FU Jilan, Zhao Xizhe, LI Luhai
Beijing Printed Electronics Engineering Technology Research Center, Beijing Institute of Graphic Communication ，Beijing, CHINA
Controllable and mono-disperse copper anoparticles were synthesized via a simple chemical method which copper nitrate trihydrate, hydrazine hydrate
and poly (vinylpyrrolidone) were used as copper source, reducing agent and capping agent, respectively. Copper nanoparticles so-prepared werecharacterized by UV-Visible spectroscopy, X-ray diffraction measurements (XRD), scanning electron microscopy (SEM ). The colloid of the copper
nanoparticles was obtained after washing and centrifuging by deionized water and acetone three times by which impurity ions can be removed.
Suspension of nano-copper conductive ink for gravure printing was obtained by adding some solvent and additives. Then, samples were obtained byproofing and sintered under the nitrogen ambience. The resistance and thickness were measured. The result illustrated that the copper particles preparedhave size about 80 nm and majority particles are spheroidal. The suspension of nano-copper conductive ink has 35.15% copper content according tothermal gravimetric analysis (TGA) and 1.29 % PVP. Surface resistance of samples proofing on polyimide film after sintering can reach 6.16 Ω/sq andthe resistivity is 1.09×10-4 Ω·cm.

2P1-092

WIREL ESS ENERGY TRANS FER S YS TEM BAS ED ON HIGH Q FLEXIB LE PLANAR-LITZ MEMS COILS ……No.383
Yang Li, Xiuhan Li, Fei Peng, Hanru Zhang, Wei Guo, Wangqiang Zhu, Tianyang Yang
Institute of Electronic and Information and Engineering, Beijing Jiaotong University, Beijing, China
Wireless energy transfer system tends to replace the battery for the power supply of implantable prosthetic devices. Coils are the key point of the wirelesstransfer system and affect the transfer efficiency. In this paper, high Q flexible planar-Litz coil is designed and implemented for the wireless energy
transfer system. Theoretical model of planar-Litz coil is given and the measurement result matches the theoretical analysis. The efficiency of wirelesstransfer system is improved by using the high Q planar-Litz coils. The experiment results show the coupling efficiency can be improved by about 40% as
the transfer distance is 0.5cm. At last, resonant coils are added into transfer system to enhance the magnetic resonance, which makes the energy transfer
efficiency improved greatly.

2P1-093

GRAVURE FAB RICATION AND STAB ILITY STUDY OF RFID ANTENNA …………………………………………No.395
ZHAO Fuyan, MO Lixin,LI Weiwei, LI Wenbo, FU Jilan, FAN Xin ming, RAN Jun, LIU Wei, HOU Yuqun, LI Luhai
Printable Electronics Research Center, Beijing Key Lab of Printing and Packaging Materials and Technology, Beijing Institute ofGraphic Communication, Beijing, China
In the article, low cost, RFID antenna is fabricated by gravure printing with PET acting as the substrate. The nano-silver ink with 50% silver content isprepared in the lab and the printing speed is set to 5m/min. After sintering at 150℃ for 2min, surface resistance of the antenna reaches to 7.31Ω/sq andthickness of the silver layer is 466nm. Then, the antenna is treated at -40℃ for 6h. Interestingly, the resistance of the antenna dropped by 9%, which may
due to the limited motivation of PVP chain in relatively low temperature. In order to study its stability, the RFID antenna has been put into the night side,sunny side and room temperature for 30 days. The resistance is nearly the same as its original after 1 month, though some decreasing appeared. The result
indicates that the antenna fabricated shows excellent stability and the working temperature can range from -40℃ to 150℃.

2P1-094

PATTERNING OF ORGANIC THIN-FILM TRANS ISTORS BAS ED ON B LEND SOLUTION VIA S ELECTIVE
DEWETTING US ING KNIFE COATING ……………………………………………………………………………………No.400
Xiang Feng 1,2, Guangqing Lin 1, Daqing Hu 1,2, Long zhen Qiu 1,2
1
Key Lab of Special Display Technology, Ministry of Education, National Engineering Lab of Special Display Technology, National
Key Lab of Advanced Display Technology, Academy of Opto-Electronic Technology, Hefei University of Technology, Hefei, China
2
School of Chemical Engineering, Hefei University of Technology, Hefei, China
Organic thin-film transistors array was prepared by selectively dewetting a blend solution of 6,13-Bis(triisopropylsilylethynyl) pentacene(TIPS_Pentacene) and polymer(methyl methacrylate) (PMMA) using knife coating. The blend films remaining in hydrophilic areas formed a
TIPS_Pentacene-top and PMMA-bottom bilayer structure. This structure is beneficial for reducing the hysteresis effect and improving the electronic
properties of OTFT devices because the PMMA bottom layer can act as a modifier to isolate carrier traps on the hydrophilic areas. Knife coating inwetting/dewetting process is a method to prepare uniformity performance devices in OTFTs array. The maximum mobility of this process is 0.062
cm2V-1s-1 and average hysteresis effect (the D-value of two threshold voltages in dual sweep) is 2.3 V.

2P1-095

EFFECT OF S ELF-ASS EMB LED MONOLAYER(SAM) ON INKJ ET PRINTED ORGANIC THIN FILM TRANS ISTORSOF POLYTHIOPHEN E …………………………………………………………………………………………………………No.403
Mengjie Chen 1,2, Rui Peng 1,2, Shiqin Chen 1,2, Peng Li1,2, Longzhen Qiu 1, 2
1
Key Lab of Special Display Technology, Ministry of Education, National Engineering Lab of Special Display Technology, National
Key Lab of Advanced Display Technology, Academy of Opto-Electronic Technology, Hefei University of Technology, Hefei, China;
2
School of Chemical Engineering, Hefei University of Technology, Hefei, China
Organic thin film transistors (OTFTs) with bottom gate and bottom contact structure had been prepared by inkjet printing. It’s found that the surface
properties of the substrate have a great influence on the morphology of the droplet and the performance of devices. When a bare SiO2 layer was applied,
the size of the dried droplet is about 60 μm and it’s hard to form a uniform film. The best field-effect mobility of inkjet printed OTFT devices was only
6×10-4 cm2 V−1 s −1 with an on/off current ratio of 60. After treating the substrate using a self-assembled monolayer (SAM ) of trichloro(phenethyl)silane(PETS), the size of the dried droplet increased to 85 μm and a uniform the film was obtained. The best field-effect mobility of the obtained devices was
up to 7.68×10-3 cm2 V−1 s −1 with an on/off current ratio exceeding 103.

96

2P1-096

INKJ ET PRINTING NARROW FINE AG LINES ON S URFACE MODIFIED POLYMERIC FILMS …………………No.506
W. Tang, Y. Chen, J. Zhao, S. Chen, L. Feng, X. Guo
Department of Electronic Engineering, Shanghai Jiao Tong University, China
In the paper, we have demonstrated a simple but effective method to inkjet print fine Ag conductive lines with improved resolution on polymeric films.
This is achieved by forming an ultra-flat polymeric film and modifying its surface energy. As a result, narrow Ag lines (< 50 μm) and short gaps (~10μm) were successfully achieved using optimized printing parameters. Meanwhile these formed Ag lines show fine morphology, smooth surface and highelectrical conductivity. The improved resolution is attributed to the reduced spreading of ink droplets on the surface modified substrate. This method
shows the potential of directly producing high-resolution electrodes for printed electronics applications.

2P1-097

TRANSPARENT ELAS TIC CAPACITIVE PRESS URE S ENSORS BAS ED ON S ILVER NANOWIRE EL ECTRODES……………………………………………………………………………………………………………………………………No.509
C. Gu, S. Chen, X. Guo
Department of Electronic Engineering, Shanghai Jiao Tong University, China
Stretchable conductive films were produced by embedding silver nanowires onto the surface of biocompatible polydimethylsiloxane (PDM S) elastomeric
membranes with low cost solution based processes. The films showed low sheet resistance (<12Ω/□) and good transparency (40% at 550nm). By
laminating two films together, transparent elastic capacitive pressure sensors were made, which present higher sensitivity to that using Al foil as theelectrode. A higher concentration of silver nanowire solution was also shown to be able to improve the sensitivity.

2P1-098

ENHANCING FLUORES CENT RESPONS E OF IMMUNOS ENS ING B Y A DEP CHIP WITH TRANSPARENTEL ECTRODES AND MICROCAVITIES ARRAY …………………………………………………………………………No.249
Cheng-Hsin Chuang 1, Jing-Wei Ju 1 , Yao -Wei Huang 2, Chun-Ping Jen 2, Fei-Bin Hsiao 3
1
Department of Mechanical Engineering, Southern Taiwan University of Science and Technology, Tainan, Taiwan
2
Department of Mechanical Engineering and Advanced Institute of Manufacturing for High-Tech Innovations, National Chung Cheng
University, Chia Yi, Taiwan
3
Department of Aeronautics and Astronautics Engineering, National Cheng Kung University, Tainan, Taiwan
Dielectrophoresis (DEP) has been demonstrated the manipulations of bio-modified particles for biosensors, and the microelectrodes are mostly made ofmetal materials such as Au, Cu and Pt, etc. However, the metal electrodes could induce extra background noise as observed the DEP chip in afluorescence microscope. Currently, the fluorescence response still dominates the indicators of immunoassays; therefore, it’s important to eliminate theextra background noise of fluorescence response form metal electrodes for an immunosensor. In this study, a DEP chip was utilized to immobilize thenanoprobes in a microcavities array for immunosensing. A transparent conductive material, Indium Tin Oxide (ITO), was employed in the fabrication of
DEP electrodes, and the fluorescence responses of DEP chip with transparent (ITO) electrodes were compared with identical DEP chip with conventional
Au electrodes during immunoassay. According to experimental results, the enhancement of fluorescence response of DEP chip with ITO electrodes was
greater than the values of DEP chip with Au electrodes about 1.57 times and 1.44 times for the immunosensing of 10 nM and 1 nM BSA, respectively. In
addition, by applying the DEP force during the immunosensing, the fluorescence response was also enhanced due to the BSA can be condensed by DEP
force. The DEP condensation was more significant for immunosensing at low BSA concentration. Consequently, we have demonstrated a DEP chip withtransparent ITO electrodes and the background noise of fluorescence response can be eliminated to enhance the sensitivity of immunosensing.

2P1-099

A NANOMETER-RES OLUTION DISPLACEMENT MEAS UREMENT S YS TEM B AS ED ON LAS ER FEEDBACK
INTERFEROMETRY …………………………………………………………………………………………………………No.606
Huilan Liu 1, 2, Heming Yao 3, Lishuang Feng 1,2
1School of Instrumentation Science and Opto-electronics Engineering, Beihang University, China
2
Key Laboratory of Micro-nano Measurement-manipulation and Physics (Ministry of Education), Beihang University, China
3
Beihang Sino-French Engineer School，Beihang University, China
Based on laser feedback interferometry (LFI) combined with phase-freezing technology (PFT), a novel displacement measurement system isdemonstrated, which improves the measurement resolution to nanometer scale. The phase modulator is added to modulate the external cavity phase, and
the PFT is used for sampling and demodulation. The displacement information of the external target is reconstructed. The signal modulation, sampling,reconstruction technology is researched and the simulation results show the feasibility of the method. Error analysis is made for searching the influenceof modulation frequency, sampling frequency and reflector vibration frequency. Verification experiment is made to check the accuracy of the systemwith appropriate parameters. It provides a displacement and vibration measurement method for MEM S elements.

2P1-100

EFFECT OF THE CHEMIS ORB ED MOLECULAR S TRUCTUR E ON THE FREQUENCY OF CARB ON NANOTUB E
RESONATORS: MOLEC ULAR DYNAMICS SIMULATIONS …………………………………………………………No.607
Ming-Lin Li1 , Wei Ye1, Yue Chen 1, Xue-Hui Lin 1, Wei-Dong Wang 2, Xiao-Xiang Yang 1
1School of Mechanical Engineering and Automation, Fuzhou University, Fuzhou, China
2
School of Electrical and Mechanical Engineering, Xidian University, Xi’an, China
Tiny mass attached to the surface of carbon nanotubes (CNTs) would induce its intrinsic frequency shift. Due to their remarkable mechanical properties,
such as exceptional high elastic modulus and low weight, CNTs hold significant potential as functional materials for the development of mass sensors
and biosensors with atomic mass resolution. The effect of the structure of molecule covalently bonded to the surface of CNTs on its intrinsic frequency
shift was investigated with fullatom molecular dynamics simulation (FAMDs), which explored the REBO potential and Lennard-Jones potential torepresent the interatomic interaction. CNTs were constrained by the clampedclamped boundary condition and the fixed-free boundary condition,
respectively. In order to highlight the effect of molecular structure on the fundamental frequency of CNTs, the simulated results via the FAMDs were97compared with those of additional mass molecular dynamics simulation (AMMDs), in which the mass of the attached molecule is lumped to the bonded
carbon atom of CNTs. Results indicate that the structure of the covalently bonded molecular is strong enough to take effect on the frequency response of
the CNT resonator.

2P1-101

A NOVEL MICRO HEAT PIPE FOR HIGH-POWER LIGHT EMITTING DIODE MODUL E …………………………No.608
Yi Luo, Gang Liu, Liangliang Zou, Xiaodong Wang
Key Laboratory for Micro/Nano Technology and System of Liaoning Province, Dalian University of Technology, Dalian, China
Light-emitting diode (LED) is a novel electronic light source that provides a direct transfer of electrical energy into light. A typical LED power package
has a heat flux of 100W/cm2, thus high power LEDs face severe thermal challenges due to their small size and general lack of a proper thermal path. The
advantage of micro heat pipes (MHPs) is based on the phase change. With the trends of using silicon wafer as the substrate in LED manufacturing, asilicon-Pyrex MHPs was fabricated for quick spread of the heat from LEDs in this paper. Flat plate grooved MHPs is introduced. The grooves were
fabricated on the silicon wafer and bonded to Pyrex 7740. Water as selected as the working liquid and the charge rate is 40%. The temperature test
experiments were carried out to test the feasibility of the MHPs in LED heat conduction, and the preliminary experiment results indicate that the heat
conductivity of MHPs is better than silicon wafer.

2P1-102

FABRICATION OF S TAB LE S ILVER NANOPARTICLES THROUGH A GREEN APPROACH ………………………No.609
Wenbin Li1, Cheng Wang 1,2, Wei Zhang 1, Weixiang Ye1 , Shun Huang 1, Zhao Yue1, Guohua Liu 1
1
College of Information Technical Science, Nankai University, Tianjin, China
2
Department of Mechanical Engineering, Columbia University, New York 10027, USA
we had suggested a novel method for the synthesis of silver nanoparticles by suitable choice of materials and solvents. It was a green, straight forward
method in an aqueous medium. Additionally, nontoxic reagents were used in the experiment and the process was environmentally friendly. This green
approach needs three reagents (dextran, tollens’ reagent, glucose) which come from renewable resources. The effects of the concentration of tollens’reagent on silver nanoparticles formation and storage stability were studied. The silver nanoparticles were characterized by transmission electron
microscopy (TEM ), energy-dispersive X-ray spectroscopy (EDS) and UV-vis spectroscopy. The results indicated that the reaction parameters
significantly affected the size, formation rate and distribution of the silver nanoparticles. This method is simple and economical therefore may bepractical for large-scale synthesis.

2P1-103

A COMPLETE ANALYTICAL MODEL FOR SQUARE DIAPHRAGM CAPACITIVE S ENSOR WITH CLAMPEDEDGES ……………………………………………………………………………………………………………………………No.610
Farah Deeba1, Shahed Khan Mohammed 2, Md. Shofiqul Islam3
1
Department of Electrical and Electronic Engineering, Bangladesh University of Engineering and Technology, Bangladesh
2
Department of Electrical and Electronic Engineering, United International University (UIU), Bangladesh
3
Department of Electrical and Computer Engineering, King Abdulaziz University, Jeddah, Saudi Arabia
Capacitive Pressure Sensors have been among the most promising M EM S in recent years due to its inherently low power consumption, higher reliability
and better performance. A complete analytical model is necessary to accurately determine the effects of sensing variables on the sensor. In this paper, amathematical model is developed for square diaphragm capacitive sensors, which includes analytical equations for loaddeflection characteristic, pull-in
voltage and critical distance at pull-in and capacitance. The work is different from the previous ones in the way that it adopts a direct method to solve thegoverning equations of deflection which gives the load-deflection characteristic without involving any numerical aid and accounts for both small andlarge deflection. Again, the numerical integration for capacitance calculation has been replaced by an approximate analytical model which reduces thecomputational effort comparably. Comparison with experimental data reveals excellent accuracy of the model.

98Conference Exhibitors
No.1

Nano Precision Corp.

TaiwanT:+886-3-5501995

www.nanoprecision-3d.com

No.2

STELLA International
Co., Ltd.

TaiwanT:+886-3-550-0499
F:+886-3-550-9339

www.stella.com.tw

No.3

MemsicSemiconductor(Wuxi)
Co.,Ltd.

China

T:+86-510-6661-6668
F:+86-510-6661-6669

www.memsic.com.cn

No.4

Xi'an Chinastar M&C
Ltd.

China

T:+86-29-88325620
F:+86-29-88237768

www.websensor.com

Suzhou Nanotech Co.,
Ltd.

China

T:+86-512-69993000
F:+86-512-69993999

www.nanopolis.cn

No.6

MiraMEMS Sensing
Technology Co., Ltd.

China

T:+86-512-65926260
F:+86-512-65928260

www.miramems.com

No.7

Femto Science Inc.

Korea

T:+82-31-203-7066
F:+82-31-204-7063

www.femtoscience.co.kr

No.8

Suzhou Delphi Laser
Co., Ltd.

China

T:+86-512-8718-9091
F:+86-512-8718-9097

www.delphilaser.com

No.5

99

Map
http://www.ieee-nems2013.org/media/map.pdf

Suzhou Bus Station
From Suzhou Bus Station to
Conference Venue: 17.1km

Suzhou Train Station
From Suzhou train Station to
Conference Venue: 18km

Suzhou North Station
From Suzhou North Station to
Conference Venue: 26.7 km

Suzhou Industrial Park
Train Station
From Suzhou Industrial
Park Train Station to
Conference Venue: 9.9 km

Shanghai Pudong
International Airport(PVG)
From Pudong
International Airport to
Conference Venue:
56.1 km★★Conference Venue★★
Worldhotel Grand Dushulake, Suzhou

100

Shanghai Hongqiao
Airport (SHA)
From Shanghai Hongqiao
Airport to Conference
Venue: 79.5 km

Direction
http://www.ieee-nems2013.org/media/map.pdf

Go To Suzhou
International Airport: Suzhou does not have its own international airport at present. It is best to use the airports ofnearby Shanghai. Shanghai Hongqiao International Airport (SHA) and Pudong International Airport (PVG) are usedfrequently by domestic and international visitors.

Hongqiao Airport (SHA), is 86 kilometers (about 53 miles) away from Suzhou. Upon arrival, passengers could
walk to the connected Shanghai Hongqiao Railway Station, and then take a bullet train to get to Suzhou in 30
minutes. Then please follow the guide of ‘how to reach Worldhotel Grand from Suzhou railway stations.'

Pudong International Airport (PVG), is located 120 kilometers (about 65 miles) away from Suzhou. There arescheduled airport shuttle buses running to Suzhou, and vice versa. Please follow the sign “Long Distance Bus” tothe bus station, where you can find the shuttle bus parking lots, at the 2nd floor of PVG's terminal building.
Operating Time: 10:00 10:40 11:10 11:40 12:10 12:40 13:10 13:50 14:20 14:50 15:20 16:10 16:50 17:20 18:10
18:50 20:00. Durations: 3 hours; Ticket Fare: RMB 84.
When you arrive in Suzhou, please inform the driver you would like to get off at ‘SIP'. (The other get off position isin downtown Suzhou, which would be farther from the conference venue). After get-off you can take a taxi to go toWorldhotel Grand. It will take about 20min and RMB 45.

In Suzhou: The Way from Railway Station to Conference Venue
1) From Suzhou Train Station:
Taxi about 30 minutes, RMB 60.

Bus:‘Fast Line No.2 Bus’, Get Off At‘ Dushulake Library’;Change No.‘156’ or ‘176’ Bus,Get Off At‘Dushulake Gymnasium', then walk about 500m to arrive at the hotel about 1 hour’s drive.

2) From Suzhou industrial Park Train Station:
 Taxi about 15 minutes, RMB 35.
 Bus:No.‘115’, Get off at‘Olive Bay’, Change No.‘156’或‘176’Bus, Get Off at ‘Dushulake Gymnasium’,
then walk about 500m to arrive at the hotel about 1 hour’s drive.
3) From Suzhou North Station: Taxi abou 50 minutes, RMB 100.

101

Hotel Information
http://www.ieee-nems2013.org/hot.html (Online Booking and Information)
Note: Notice to attend IEEE_NEMS 2013, Send the email within valid date.

Hotel Name

Information

Distance

Worldhotel Grand Dushulake Suzhou Tel: +86 512 69568888 -71326/71321(ConferenceVenue) （Add:No.299 Email:reservations@worldhotelgranddushul
Qiyue Street industrial Park）(theake.com
North of Dushulake Yueliangwan)
PS: Foreign Guest please scan two sides ofcredit card in Email.
★★★★★

0km

Four Points By Sheraton Suzhou(Add:No.8Dushulake Yueliangwan
Road industrial Park)(Near
Dushulake) ★★★★★

0.5km

Tel: +86 512 6799 7999
Email: reservation.suzhou@fourpoints.com

Jinling Guanyuan International Hotel
Tel: +86 512 62608888
Suzhou (Add:No.168 Cuiwei Street
Email: sales2_jinlingsz@vip.sina.com
industrial Park Suzhou) ★★★★★

1.0km

Home Inn (Suzhou Park Nanometerbiological area) (Add:No.218 Xinghu Tel: +86 512 6281 1999/9
Street)1.7km

Floft Hotel Suzhou(Add:3rd Floor1-A Area Creative
Industry Park No.328 XinghuStreet
industrial Park）★★★

Tel: +86 512-62925300
Email: huisuo@sistm.com.cn

1.8km

Jingzhai Hotel Suzhou(Add:No 158 Ren'ai Road industrial
Park) ★★★★

http://www.jingzhaihotel.com/
Tel: +86 512 62601999-8855
Email: 15151414195@139.com

2.5km

Xi'an Jiaotong Liverpool
International Conference Center(Add No.99 Ren'ai Road industrial
Park Suzhou) ★★★★

Tel: +86 0512 8666 5555
Email: hongweiita@hotmail.com

3.1km

102

Travel Information
1) The Tiger Hill
Lying to west of the ancient city of Suzhou with a history of over 2,500 years, the Tiger Hill has the reputation of
being No.1 sight of Wu region. “It would be a loss if you miss the Tiger Hill in your visit to Suzhou”(Su Dongpo).

2) Suzhou Museum
Founded in 1960 and originally located in the national historic landmark,Zhong Wang Fu palace complex, Suzhou
Museum has been a highly-regarded regional museum with a number of significant Chinese cultural relics.

3) Ligongdi

103

Technical Tour
Nanopolis Suzhou
The Nanotech Commercialization Hub in China Suzhou has been
designated by the Ministry of Science and Technology (MOST) as
the ‘China International Nanotech Innovation Cluster (CHInano)’.
SIP launched the ‘Nanopolis Suzhou’ initiative to provide a complete
ecosystem support for the growth of nanotechnology and its enablingindustries. The industry areas of focus include micro andnano-manufacturing technologies, energy and green technologies
and nano medicine. Suzhou intends to attract over 200 nanotech
companies from all over the world and 10,000 nanotech experts
within the next 5 years to make Suzhou the most global and innovative nanotech hub in China by 2015.

SINANO, CAS
Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO)
is a joint venture between Chinese Academy of Sciences andJiangsu local government, with emphasis on applied research
to help local industry and boosting local economy. It has 7
research divisions focusing on nanomaterials and devices,
nanobiotechnology, printable electronics as well as other interdisciplinary fields. In addition, there are two facilities
specialized for micro/nanofabrication and characterization/metrology with over $15 millions of equipments, which are
fully open to outside users. SINANO also established wide international collaborations with research groups from US,
Germany, Russia, Canada, Japan, Finland, Singapore, Hong Kong and many others regions or countries.

SVG Optronics
As the pioneer in the advanced micro/nano manufacturing, including
UV laser maskless lithography, nano-patterning systems androll-to-roll nano-imprinting technologies, SVG Optronics has
established the capabilities in the functional micro-nano devices andoptical films, such as ultra-thin light guide plates, large size touch
panel sensors, 3D imaging, microlens array films and no-ink
nano-printing, as well as the nano-light trapping and plasmonic technologies for improving LED's efficiency. SVG
Optronics is a stock company in Shenzhen Stock Exchange, code: SZ300331, on June.28, 2012.

104

Contact Information
Conference Secretary
E-mail : IEEENEMS2013@Gmail.com
Phone & FAX: +86-10-62767742
Postal Address: IEEE-NEMS 2013 Conference
Address: Micro&Nanoelectronics Building .Room 319
Department of Microelectronics, Peking University
Haidian District，Beijing，China，100871

Conference Venue
All sessions will be held at Dushu Lake Hotel
Address: No.299 Qiyue Street, Suzhou Industrial Park (the North of Dushulake Yueliangwan)
Suzhou, China
Tel: +86 512 69568888 -71326/71321
Electricity
The electric current used in China is 220V 50Hz. The hotels can provide 220V power outlets. Please
note that plug adapters may be necessary.
Dialing Codes
China International Country Code: +86
Suzhou’s Local Area Code: 512

105

106

107

Important Dates
 September 15, 2013: Paper submission1 (2-6 pages)
 October 31, 2013: Notification of acceptance December 15, 2013: Submission of final full paper 2
 December 31, 2013: Early bird registration deadline
1. To qualify for best paper contests, a submission must be from 4 to 6 pages
2. To be included in IEEE Xplore database, a paper must be from 4 to 6 pages

General Chair: Wen J. Li, City University of Hong Kong, Hong Kong
General Co-Chair: Vincent G.-B. Lee, National Tsin Hua University, Taiwan
Technical Program Chair: Eric P. Y. Chiou, UCLA, USA
Organizing Chair: Aaron T. Ohta, University of Hawaii, USA

General Conference InfoThe IEEE-NEMS is a key conference series sponsored by the IEEE Nanotechnology Council focusing
on advanced research areas related to MEMS, nanotechnology, and molecular technology. Prior
conferences were held in Suzhou (China, 2013), Kyoto (Japan, 2012), Kaohsiung (Taiwan, 2011),
Xiamen (China, 2010), Shenzhen (China, 2009), Hainan Island (China, 2008), Bangkok (Thailand,2007), and Zhuhai (China, 2006). For the first time, the conference will be held outside Asia. The
conference typically has ~350 attendees with participants from more than 20 countries andregions world-wide.

8TH